A focused ion beam having a cross section of submicron diameter, a high ion current, and a narrow energy range is generated from a target comprised of particle source material by laser ablation. The method involves directing a laser beam having a cross section of critical diameter onto the target, producing a cloud ...

A focused ion beam having a cross section of submicron diameter, a high ion current, and a narrow energy range is generated from a target comprised of particle source material by laser ablation. The method involves directing a laser beam having a cross section of critical diameter onto the target, producing a cloud ...

The authors have developed an intense ion beam to investigate materials processing applications. Initial experiments have focused on thin film formation by depositing beam-ablated target material on substrates. Measurements of beam properties governing target ablation are presented here. Techniques include Thomson ...