Comparison of SLAR images and small-scale, low-sun aerial photographs.

NASA Technical Reports Server (NTRS)

Clark, M. M.

1971-01-01

A comparison of side-looking airborne radar (SLAR) images and black and white aerial photos of similar scale and illumination of an area in the Mojave Desert of California shows that aerial photos yield far more information about geology than do SLAR images because of greater resolution, tonal range, and geometric fidelity, and easier use in stereo. Nevertheless, radar can differentiate some materials or surfaces that aerial photos cannot; thus, they should be considered as complementary, rather than competing tools in geologic investigations. The most significant advantage of SLAR, however, is its freedom from the stringent conditions of weather, date, and time that are required by small-scale aerial photos taken with a specified direction and angle of illumination. Indeed, in low latitudes, SLAR is the only way to obtain small-scale images with low illumination from certain directions; moreover, in areas of nearly continuous cloudiness, radar may be the only practical source of small-scale images.

CMOS Imaging Sensor Technology for Aerial Mapping Cameras

NASA Astrophysics Data System (ADS)

Neumann, Klaus; Welzenbach, Martin; Timm, Martin

2016-06-01

In June 2015 Leica Geosystems launched the first large format aerial mapping camera using CMOS sensor technology, the Leica DMC III. This paper describes the motivation to change from CCD sensor technology to CMOS for the development of this new aerial mapping camera. In 2002 the DMC first generation was developed by Z/I Imaging. It was the first large format digital frame sensor designed for mapping applications. In 2009 Z/I Imaging designed the DMC II which was the first digital aerial mapping camera using a single ultra large CCD sensor to avoid stitching of smaller CCDs. The DMC III is now the third generation of large format frame sensor developed by Z/I Imaging and Leica Geosystems for the DMC camera family. It is an evolution of the DMC II using the same system design with one large monolithic PAN sensor and four multi spectral camera heads for R,G, B and NIR. For the first time a 391 Megapixel large CMOS sensor had been used as PAN chromatic sensor, which is an industry record. Along with CMOS technology goes a range of technical benefits. The dynamic range of the CMOS sensor is approx. twice the range of a comparable CCD sensor and the signal to noise ratio is significantly better than with CCDs. Finally results from the first DMC III customer installations and test flights will be presented and compared with other CCD based aerial sensors.

Aerial Images and Convolutional Neural Network for Cotton Bloom Detection.

PubMed

Xu, Rui; Li, Changying; Paterson, Andrew H; Jiang, Yu; Sun, Shangpeng; Robertson, Jon S

2017-01-01

Monitoring flower development can provide useful information for production management, estimating yield and selecting specific genotypes of crops. The main goal of this study was to develop a methodology to detect and count cotton flowers, or blooms, using color images acquired by an unmanned aerial system. The aerial images were collected from two test fields in 4 days. A convolutional neural network (CNN) was designed and trained to detect cotton blooms in raw images, and their 3D locations were calculated using the dense point cloud constructed from the aerial images with the structure from motion method. The quality of the dense point cloud was analyzed and plots with poor quality were excluded from data analysis. A constrained clustering algorithm was developed to register the same bloom detected from different images based on the 3D location of the bloom. The accuracy and incompleteness of the dense point cloud were analyzed because they affected the accuracy of the 3D location of the blooms and thus the accuracy of the bloom registration result. The constrained clustering algorithm was validated using simulated data, showing good efficiency and accuracy. The bloom count from the proposed method was comparable with the number counted manually with an error of -4 to 3 blooms for the field with a single plant per plot. However, more plots were underestimated in the field with multiple plants per plot due to hidden blooms that were not captured by the aerial images. The proposed methodology provides a high-throughput method to continuously monitor the flowering progress of cotton.

Precision Relative Positioning for Automated Aerial Refueling from a Stereo Imaging System

DTIC Science & Technology

2015-03-01

PRECISION RELATIVE POSITIONING FOR AUTOMATED AERIAL REFUELING FROM A STEREO IMAGING SYSTEM THESIS Kyle P. Werner, 2Lt, USAF AFIT-ENG-MS-15-M-048...REFUELING FROM A STEREO IMAGING SYSTEM THESIS Presented to the Faculty Department of Electrical and Computer Engineering Graduate School of...RELEASE; DISTRIBUTION UNLIMITED. AFIT-ENG-MS-15-M-048 PRECISION RELATIVE POSITIONING FOR AUTOMATED AERIAL REFUELING FROM A STEREO IMAGING SYSTEM THESIS

Study of Automatic Image Rectification and Registration of Scanned Historical Aerial Photographs

NASA Astrophysics Data System (ADS)

Chen, H. R.; Tseng, Y. H.

2016-06-01

Historical aerial photographs directly provide good evidences of past times. The Research Center for Humanities and Social Sciences (RCHSS) of Taiwan Academia Sinica has collected and scanned numerous historical maps and aerial images of Taiwan and China. Some maps or images have been geo-referenced manually, but most of historical aerial images have not been registered since there are no GPS or IMU data for orientation assisting in the past. In our research, we developed an automatic process of matching historical aerial images by SIFT (Scale Invariant Feature Transform) for handling the great quantity of images by computer vision. SIFT is one of the most popular method of image feature extracting and matching. This algorithm extracts extreme values in scale space into invariant image features, which are robust to changing in rotation scale, noise, and illumination. We also use RANSAC (Random sample consensus) to remove outliers, and obtain good conjugated points between photographs. Finally, we manually add control points for registration through least square adjustment based on collinear equation. In the future, we can use image feature points of more photographs to build control image database. Every new image will be treated as query image. If feature points of query image match the features in database, it means that the query image probably is overlapped with control images.With the updating of database, more and more query image can be matched and aligned automatically. Other research about multi-time period environmental changes can be investigated with those geo-referenced temporal spatial data.

Error Estimation Techniques to Refine Overlapping Aerial Image Mosaic Processes via Detected Parameters

ERIC Educational Resources Information Center

Bond, William Glenn

2012-01-01

In this paper, I propose to demonstrate a means of error estimation preprocessing in the assembly of overlapping aerial image mosaics. The mosaic program automatically assembles several hundred aerial images from a data set by aligning them, via image registration using a pattern search method, onto a GIS grid. The method presented first locates…

Aerial image based die-to-model inspections of advanced technology masks

NASA Astrophysics Data System (ADS)

Kim, Jun; Lei, Wei-Guo; McCall, Joan; Zaatri, Suheil; Penn, Michael; Nagpal, Rajesh; Faivishevsky, Lev; Ben-Yishai, Michael; Danino, Udy; Tam, Aviram; Dassa, Oded; Balasubramanian, Vivek; Shah, Tejas H.; Wagner, Mark; Mangan, Shmoolik

2009-10-01

Die-to-Model (D2M) inspection is an innovative approach to running inspection based on a mask design layout data. The D2M concept takes inspection from the traditional domain of mask pattern to the preferred domain of the wafer aerial image. To achieve this, D2M transforms the mask layout database into a resist plane aerial image, which in turn is compared to the aerial image of the mask, captured by the inspection optics. D2M detection algorithms work similarly to an Aerial D2D (die-to-die) inspection, but instead of comparing a die to another die it is compared to the aerial image model. D2M is used whenever D2D inspection is not practical (e.g., single die) or when a validation of mask conformity to design is needed, i.e., for printed pattern fidelity. D2M is of particular importance for inspection of logic single die masks, where no simplifying assumption of pattern periodicity may be done. The application can tailor the sensitivity to meet the needs at different locations, such as device area, scribe lines and periphery. In this paper we present first test results of the D2M mask inspection application at a mask shop. We describe the methodology of using D2M, and review the practical aspects of the D2M mask inspection.

Overlay metrology for double patterning processes

NASA Astrophysics Data System (ADS)

Leray, Philippe; Cheng, Shaunee; Laidler, David; Kandel, Daniel; Adel, Mike; Dinu, Berta; Polli, Marco; Vasconi, Mauro; Salski, Bartlomiej

2009-03-01

The double patterning (DPT) process is foreseen by the industry to be the main solution for the 32 nm technology node and even beyond. Meanwhile process compatibility has to be maintained and the performance of overlay metrology has to improve. To achieve this for Image Based Overlay (IBO), usually the optics of overlay tools are improved. It was also demonstrated that these requirements are achievable with a Diffraction Based Overlay (DBO) technique named SCOLTM [1]. In addition, we believe that overlay measurements with respect to a reference grid are required to achieve the required overlay control [2]. This induces at least a three-fold increase in the number of measurements (2 for double patterned layers to the reference grid and 1 between the double patterned layers). The requirements of process compatibility, enhanced performance and large number of measurements make the choice of overlay metrology for DPT very challenging. In this work we use different flavors of the standard overlay metrology technique (IBO) as well as the new technique (SCOL) to address these three requirements. The compatibility of the corresponding overlay targets with double patterning processes (Litho-Etch-Litho-Etch (LELE); Litho-Freeze-Litho-Etch (LFLE), Spacer defined) is tested. The process impact on different target types is discussed (CD bias LELE, Contrast for LFLE). We compare the standard imaging overlay metrology with non-standard imaging techniques dedicated to double patterning processes (multilayer imaging targets allowing one overlay target instead of three, very small imaging targets). In addition to standard designs already discussed [1], we investigate SCOL target designs specific to double patterning processes. The feedback to the scanner is determined using the different techniques. The final overlay results obtained are compared accordingly. We conclude with the pros and cons of each technique and suggest the optimal metrology strategy for overlay control in double

Image-based metrology of porous tissue engineering scaffolds

NASA Astrophysics Data System (ADS)

Rajagopalan, Srinivasan; Robb, Richard A.

2006-03-01

Tissue engineering is an interdisciplinary effort aimed at the repair and regeneration of biological tissues through the application and control of cells, porous scaffolds and growth factors. The regeneration of specific tissues guided by tissue analogous substrates is dependent on diverse scaffold architectural indices that can be derived quantitatively from the microCT and microMR images of the scaffolds. However, the randomness of pore-solid distributions in conventional stochastic scaffolds presents unique computational challenges. As a result, image-based characterization of scaffolds has been predominantly qualitative. In this paper, we discuss quantitative image-based techniques that can be used to compute the metrological indices of porous tissue engineering scaffolds. While bulk averaged quantities such as porosity and surface are derived directly from the optimal pore-solid delineations, the spatially distributed geometric indices are derived from the medial axis representations of the pore network. The computational framework proposed (to the best of our knowledge for the first time in tissue engineering) in this paper might have profound implications towards unraveling the symbiotic structure-function relationship of porous tissue engineering scaffolds.

An improved dehazing algorithm of aerial high-definition image

NASA Astrophysics Data System (ADS)

Jiang, Wentao; Ji, Ming; Huang, Xiying; Wang, Chao; Yang, Yizhou; Li, Tao; Wang, Jiaoying; Zhang, Ying

2016-01-01

For unmanned aerial vehicle(UAV) images, the sensor can not get high quality images due to fog and haze weather. To solve this problem, An improved dehazing algorithm of aerial high-definition image is proposed. Based on the model of dark channel prior, the new algorithm firstly extracts the edges from crude estimated transmission map and expands the extracted edges. Then according to the expended edges, the algorithm sets a threshold value to divide the crude estimated transmission map into different areas and makes different guided filter on the different areas compute the optimized transmission map. The experimental results demonstrate that the performance of the proposed algorithm is substantially the same as the one based on dark channel prior and guided filter. The average computation time of the new algorithm is around 40% of the one as well as the detection ability of UAV image is improved effectively in fog and haze weather.

Vehicle Detection of Aerial Image Using TV-L1 Texture Decomposition

NASA Astrophysics Data System (ADS)

Wang, Y.; Wang, G.; Li, Y.; Huang, Y.

2016-06-01

Vehicle detection from high-resolution aerial image facilitates the study of the public traveling behavior on a large scale. In the context of road, a simple and effective algorithm is proposed to extract the texture-salient vehicle among the pavement surface. Texturally speaking, the majority of pavement surface changes a little except for the neighborhood of vehicles and edges. Within a certain distance away from the given vector of the road network, the aerial image is decomposed into a smoothly-varying cartoon part and an oscillatory details of textural part. The variational model of Total Variation regularization term and L1 fidelity term (TV-L1) is adopted to obtain the salient texture of vehicles and the cartoon surface of pavement. To eliminate the noise of texture decomposition, regions of pavement surface are refined by seed growing and morphological operation. Based on the shape saliency analysis of the central objects in those regions, vehicles are detected as the objects of rectangular shape saliency. The proposed algorithm is tested with a diverse set of aerial images that are acquired at various resolution and scenarios around China. Experimental results demonstrate that the proposed algorithm can detect vehicles at the rate of 71.5% and the false alarm rate of 21.5%, and that the speed is 39.13 seconds for a 4656 x 3496 aerial image. It is promising for large-scale transportation management and planning.

Evaluation of Deep Learning Based Stereo Matching Methods: from Ground to Aerial Images

NASA Astrophysics Data System (ADS)

Liu, J.; Ji, S.; Zhang, C.; Qin, Z.

2018-05-01

Dense stereo matching has been extensively studied in photogrammetry and computer vision. In this paper we evaluate the application of deep learning based stereo methods, which were raised from 2016 and rapidly spread, on aerial stereos other than ground images that are commonly used in computer vision community. Two popular methods are evaluated. One learns matching cost with a convolutional neural network (known as MC-CNN); the other produces a disparity map in an end-to-end manner by utilizing both geometry and context (known as GC-net). First, we evaluate the performance of the deep learning based methods for aerial stereo images by a direct model reuse. The models pre-trained on KITTI 2012, KITTI 2015 and Driving datasets separately, are directly applied to three aerial datasets. We also give the results of direct training on target aerial datasets. Second, the deep learning based methods are compared to the classic stereo matching method, Semi-Global Matching(SGM), and a photogrammetric software, SURE, on the same aerial datasets. Third, transfer learning strategy is introduced to aerial image matching based on the assumption of a few target samples available for model fine tuning. It experimentally proved that the conventional methods and the deep learning based methods performed similarly, and the latter had greater potential to be explored.

D City Transformations by Time Series of Aerial Images

NASA Astrophysics Data System (ADS)

Adami, A.

2015-02-01

Recent photogrammetric applications, based on dense image matching algorithms, allow to use not only images acquired by digital cameras, amateur or not, but also to recover the vast heritage of analogue photographs. This possibility opens up many possibilities in the use and enhancement of existing photos heritage. The research of the original figuration of old buildings, the virtual reconstruction of disappeared architectures and the study of urban development are some of the application areas that exploit the great cultural heritage of photography. Nevertheless there are some restrictions in the use of historical images for automatic reconstruction of buildings such as image quality, availability of camera parameters and ineffective geometry of image acquisition. These constrains are very hard to solve and it is difficult to discover good dataset in the case of terrestrial close range photogrammetry for the above reasons. Even the photographic archives of museums and superintendence, while retaining a wealth of documentation, have no dataset for a dense image matching approach. Compared to the vast collection of historical photos, the class of aerial photos meets both criteria stated above. In this paper historical aerial photographs are used with dense image matching algorithms to realize 3d models of a city in different years. The models can be used to study the urban development of the city and its changes through time. The application relates to the city centre of Verona, for which some time series of aerial photographs have been retrieved. The models obtained in this way allowed, right away, to observe the urban development of the city, the places of expansion and new urban areas. But a more interesting aspect emerged from the analytical comparison between models. The difference, as the Euclidean distance, between two models gives information about new buildings or demolitions. As considering accuracy it is necessary point out that the quality of final

Aerial Vehicle Surveys of other Planetary Atmospheres and Surfaces: Imaging, Remote-sensing, and Autonomy Technology Requirements

NASA Technical Reports Server (NTRS)

Young, Larry A.; Pisanich, Gregory; Ippolito, Corey; Alena, Rick

2005-01-01

The objective of this paper is to review the anticipated imaging and remote-sensing technology requirements for aerial vehicle survey missions to other planetary bodies in our Solar system that can support in-atmosphere flight. In the not too distant future such planetary aerial vehicle (a.k.a. aerial explorers) exploration missions will become feasible. Imaging and remote-sensing observations will be a key objective for these missions. Accordingly, it is imperative that optimal solutions in terms of imaging acquisition and real-time autonomous analysis of image data sets be developed for such vehicles.

Underwater binocular imaging of aerial objects versus the position of eyes relative to the flat water surface.

PubMed

Barta, András; Horváth, Gábor

2003-12-01

The apparent position, size, and shape of aerial objects viewed binocularly from water change as a result of the refraction of light at the water surface. Earlier studies of the refraction-distorted structure of the aerial binocular visual field of underwater observers were restricted to either vertically or horizontally oriented eyes. Here we calculate the position of the binocular image point of an aerial object point viewed by two arbitrarily positioned underwater eyes when the water surface is flat. Assuming that binocular image fusion is performed by appropriate vergent eye movements to bring the object's image onto the foveae, the structure of the aerial binocular visual field is computed and visualized as a function of the relative positions of the eyes. We also analyze two erroneous representations of the underwater imaging of aerial objects that have occurred in the literature. It is demonstrated that the structure of the aerial binocular visual field of underwater observers distorted by refraction is more complex than has been thought previously.

A Low-Cost Imaging System for Aerial Applicators

USDA-ARS?s Scientific Manuscript database

Agricultural aircraft provide a readily available and versatile platform for airborne remote sensing. Although various airborne imaging systems are being used for research and commercial applications, most of these systems are either too expensive or too complex to be of practical use for aerial app...

Aerial image databases for pipeline rights-of-way management

NASA Astrophysics Data System (ADS)

Jadkowski, Mark A.

1996-03-01

Pipeline companies that own and manage extensive rights-of-way corridors are faced with ever-increasing regulatory pressures, operating issues, and the need to remain competitive in today's marketplace. Automation has long been an answer to the problem of having to do more work with less people, and Automated Mapping/Facilities Management/Geographic Information Systems (AM/FM/GIS) solutions have been implemented at several pipeline companies. Until recently, the ability to cost-effectively acquire and incorporate up-to-date aerial imagery into these computerized systems has been out of the reach of most users. NASA's Earth Observations Commercial Applications Program (EOCAP) is providing a means by which pipeline companies can bridge this gap. The EOCAP project described in this paper includes a unique partnership with NASA and James W. Sewall Company to develop an aircraft-mounted digital camera system and a ground-based computer system to geometrically correct and efficiently store and handle the digital aerial images in an AM/FM/GIS environment. This paper provides a synopsis of the project, including details on (1) the need for aerial imagery, (2) NASA's interest and role in the project, (3) the design of a Digital Aerial Rights-of-Way Monitoring System, (4) image georeferencing strategies for pipeline applications, and (5) commercialization of the EOCAP technology through a prototype project at Algonquin Gas Transmission Company which operates major gas pipelines in New England, New York, and New Jersey.

Moving object detection using dynamic motion modelling from UAV aerial images.

PubMed

Saif, A F M Saifuddin; Prabuwono, Anton Satria; Mahayuddin, Zainal Rasyid

2014-01-01

Motion analysis based moving object detection from UAV aerial image is still an unsolved issue due to inconsideration of proper motion estimation. Existing moving object detection approaches from UAV aerial images did not deal with motion based pixel intensity measurement to detect moving object robustly. Besides current research on moving object detection from UAV aerial images mostly depends on either frame difference or segmentation approach separately. There are two main purposes for this research: firstly to develop a new motion model called DMM (dynamic motion model) and secondly to apply the proposed segmentation approach SUED (segmentation using edge based dilation) using frame difference embedded together with DMM model. The proposed DMM model provides effective search windows based on the highest pixel intensity to segment only specific area for moving object rather than searching the whole area of the frame using SUED. At each stage of the proposed scheme, experimental fusion of the DMM and SUED produces extracted moving objects faithfully. Experimental result reveals that the proposed DMM and SUED have successfully demonstrated the validity of the proposed methodology.

Floating aerial 3D display based on the freeform-mirror and the improved integral imaging system

NASA Astrophysics Data System (ADS)

Yu, Xunbo; Sang, Xinzhu; Gao, Xin; Yang, Shenwu; Liu, Boyang; Chen, Duo; Yan, Binbin; Yu, Chongxiu

2018-09-01

A floating aerial three-dimensional (3D) display based on the freeform-mirror and the improved integral imaging system is demonstrated. In the traditional integral imaging (II), the distortion originating from lens aberration warps elemental images and degrades the visual effect severely. To correct the distortion of the observed pixels and to improve the image quality, a directional diffuser screen (DDS) is introduced. However, the improved integral imaging system can hardly present realistic images with the large off-screen depth, which limits floating aerial visual experience. To display the 3D image in the free space, the off-axis reflection system with the freeform-mirror is designed. By combining the improved II and the designed freeform optical element, the floating aerial 3D image is presented.

Developments in optical modeling methods for metrology

NASA Astrophysics Data System (ADS)

Davidson, Mark P.

1999-06-01

Despite the fact that in recent years the scanning electron microscope has come to dominate the linewidth measurement application for wafer manufacturing, there are still many applications for optical metrology and alignment. These include mask metrology, stepper alignment, and overlay metrology. Most advanced non-optical lithographic technologies are also considering using topics for alignment. In addition, there have been a number of in-situ technologies proposed which use optical measurements to control one aspect or another of the semiconductor process. So optics is definitely not dying out in the semiconductor industry. In this paper a description of recent advances in optical metrology and alignment modeling is presented. The theory of high numerical aperture image simulation for partially coherent illumination is discussed. The implications of telecentric optics on the image simulation is also presented. Reciprocity tests are proposed as an important measure of numerical accuracy. Diffraction efficiencies for chrome gratings on reticles are one good way to test Kirchoff's approximation as compared to rigorous calculations. We find significant differences between the predictions of Kirchoff's approximation and rigorous methods. The methods for simulating brightfield, confocal, and coherence probe microscope imags are outlined, as are methods for describing aberrations such as coma, spherical aberration, and illumination aperture decentering.

Automatic Line Network Extraction from Aerial Imagery of Urban Areas through Knowledge Based Image Analysis

DTIC Science & Technology

1989-08-01

Automatic Line Network Extraction from Aerial Imangery of Urban Areas Sthrough KnowledghBased Image Analysis N 04 Final Technical ReportI December...Automatic Line Network Extraction from Aerial Imagery of Urban Areas through Knowledge Based Image Analysis Accesion For NTIS CRA&I DTIC TAB 0...paittern re’ognlition. blac’kboardl oriented symbollic processing, knowledge based image analysis , image understanding, aer’ial imsagery, urban area, 17

A low-cost dual-camera imaging system for aerial applicators

USDA-ARS?s Scientific Manuscript database

Agricultural aircraft provide a readily available remote sensing platform as low-cost and easy-to-use consumer-grade cameras are being increasingly used for aerial imaging. In this article, we report on a dual-camera imaging system we recently assembled that can capture RGB and near-infrared (NIR) i...

MO-G-12A-01: Quantitative Imaging Metrology: What Should Be Assessed and How?

DOE Office of Scientific and Technical Information (OSTI.GOV)

Giger, M; Petrick, N; Obuchowski, N

The first two symposia in the Quantitative Imaging Track focused on 1) the introduction of quantitative imaging (QI) challenges and opportunities, and QI efforts of agencies and organizations such as the RSNA, NCI, FDA, and NIST, and 2) the techniques, applications, and challenges of QI, with specific examples from CT, PET/CT, and MR. This third symposium in the QI Track will focus on metrology and its importance in successfully advancing the QI field. While the specific focus will be on QI, many of the concepts presented are more broadly applicable to many areas of medical physics research and applications. Asmore » such, the topics discussed should be of interest to medical physicists involved in imaging as well as therapy. The first talk of the session will focus on the introduction to metrology and why it is critically important in QI. The second talk will focus on appropriate methods for technical performance assessment. The third talk will address statistically valid methods for algorithm comparison, a common problem not only in QI but also in other areas of medical physics. The final talk in the session will address strategies for publication of results that will allow statistically valid meta-analyses, which is critical for combining results of individual studies with typically small sample sizes in a manner that can best inform decisions and advance the field. Learning Objectives: Understand the importance of metrology in the QI efforts. Understand appropriate methods for technical performance assessment. Understand methods for comparing algorithms with or without reference data (i.e., “ground truth”). Understand the challenges and importance of reporting results in a manner that allows for statistically valid meta-analyses.« less

Integration of mask and silicon metrology in DFM

NASA Astrophysics Data System (ADS)

Matsuoka, Ryoichi; Mito, Hiroaki; Sugiyama, Akiyuki; Toyoda, Yasutaka

2009-03-01

We have developed a highly integrated method of mask and silicon metrology. The method adopts a metrology management system based on DBM (Design Based Metrology). This is the high accurate contouring created by an edge detection algorithm used in mask CD-SEM and silicon CD-SEM. We have inspected the high accuracy, stability and reproducibility in the experiments of integration. The accuracy is comparable with that of the mask and silicon CD-SEM metrology. In this report, we introduce the experimental results and the application. As shrinkage of design rule for semiconductor device advances, OPC (Optical Proximity Correction) goes aggressively dense in RET (Resolution Enhancement Technology). However, from the view point of DFM (Design for Manufacturability), the cost of data process for advanced MDP (Mask Data Preparation) and mask producing is a problem. Such trade-off between RET and mask producing is a big issue in semiconductor market especially in mask business. Seeing silicon device production process, information sharing is not completely organized between design section and production section. Design data created with OPC and MDP should be linked to process control on production. But design data and process control data are optimized independently. Thus, we provided a solution of DFM: advanced integration of mask metrology and silicon metrology. The system we propose here is composed of followings. 1) Design based recipe creation: Specify patterns on the design data for metrology. This step is fully automated since they are interfaced with hot spot coordinate information detected by various verification methods. 2) Design based image acquisition: Acquire the images of mask and silicon automatically by a recipe based on the pattern design of CD-SEM.It is a robust automated step because a wide range of design data is used for the image acquisition. 3) Contour profiling and GDS data generation: An image profiling process is applied to the acquired image based

HISTORIC IMAGE: AERIAL VIEW OF THE CEMETERY AND ITS ENVIRONS. ...

Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

HISTORIC IMAGE: AERIAL VIEW OF THE CEMETERY AND ITS ENVIRONS. PHOTOGRAPH TAKEN ON 18 MAY 1948. NCA HISTORY COLLECTION. - Knoxville National Cemetery, 939 Tyson Street, Northwest, Knoxville, Knox County, TN

a Fast Approach for Stitching of Aerial Images

NASA Astrophysics Data System (ADS)

Moussa, A.; El-Sheimy, N.

2016-06-01

The last few years have witnessed an increasing volume of aerial image data because of the extensive improvements of the Unmanned Aerial Vehicles (UAVs). These newly developed UAVs have led to a wide variety of applications. A fast assessment of the achieved coverage and overlap of the acquired images of a UAV flight mission is of great help to save the time and cost of the further steps. A fast automatic stitching of the acquired images can help to visually assess the achieved coverage and overlap during the flight mission. This paper proposes an automatic image stitching approach that creates a single overview stitched image using the acquired images during a UAV flight mission along with a coverage image that represents the count of overlaps between the acquired images. The main challenge of such task is the huge number of images that are typically involved in such scenarios. A short flight mission with image acquisition frequency of one second can capture hundreds to thousands of images. The main focus of the proposed approach is to reduce the processing time of the image stitching procedure by exploiting the initial knowledge about the images positions provided by the navigation sensors. The proposed approach also avoids solving for all the transformation parameters of all the photos together to save the expected long computation time if all the parameters were considered simultaneously. After extracting the points of interest of all the involved images using Scale-Invariant Feature Transform (SIFT) algorithm, the proposed approach uses the initial image's coordinates to build an incremental constrained Delaunay triangulation that represents the neighborhood of each image. This triangulation helps to match only the neighbor images and therefore reduces the time-consuming features matching step. The estimated relative orientation between the matched images is used to find a candidate seed image for the stitching process. The pre-estimated transformation

Robust Vehicle Detection in Aerial Images Based on Cascaded Convolutional Neural Networks.

PubMed

Zhong, Jiandan; Lei, Tao; Yao, Guangle

2017-11-24

Vehicle detection in aerial images is an important and challenging task. Traditionally, many target detection models based on sliding-window fashion were developed and achieved acceptable performance, but these models are time-consuming in the detection phase. Recently, with the great success of convolutional neural networks (CNNs) in computer vision, many state-of-the-art detectors have been designed based on deep CNNs. However, these CNN-based detectors are inefficient when applied in aerial image data due to the fact that the existing CNN-based models struggle with small-size object detection and precise localization. To improve the detection accuracy without decreasing speed, we propose a CNN-based detection model combining two independent convolutional neural networks, where the first network is applied to generate a set of vehicle-like regions from multi-feature maps of different hierarchies and scales. Because the multi-feature maps combine the advantage of the deep and shallow convolutional layer, the first network performs well on locating the small targets in aerial image data. Then, the generated candidate regions are fed into the second network for feature extraction and decision making. Comprehensive experiments are conducted on the Vehicle Detection in Aerial Imagery (VEDAI) dataset and Munich vehicle dataset. The proposed cascaded detection model yields high performance, not only in detection accuracy but also in detection speed.

Robust Vehicle Detection in Aerial Images Based on Cascaded Convolutional Neural Networks

PubMed Central

Zhong, Jiandan; Lei, Tao; Yao, Guangle

2017-01-01

Vehicle detection in aerial images is an important and challenging task. Traditionally, many target detection models based on sliding-window fashion were developed and achieved acceptable performance, but these models are time-consuming in the detection phase. Recently, with the great success of convolutional neural networks (CNNs) in computer vision, many state-of-the-art detectors have been designed based on deep CNNs. However, these CNN-based detectors are inefficient when applied in aerial image data due to the fact that the existing CNN-based models struggle with small-size object detection and precise localization. To improve the detection accuracy without decreasing speed, we propose a CNN-based detection model combining two independent convolutional neural networks, where the first network is applied to generate a set of vehicle-like regions from multi-feature maps of different hierarchies and scales. Because the multi-feature maps combine the advantage of the deep and shallow convolutional layer, the first network performs well on locating the small targets in aerial image data. Then, the generated candidate regions are fed into the second network for feature extraction and decision making. Comprehensive experiments are conducted on the Vehicle Detection in Aerial Imagery (VEDAI) dataset and Munich vehicle dataset. The proposed cascaded detection model yields high performance, not only in detection accuracy but also in detection speed. PMID:29186756

Using aerial photography and image analysis to measure changes in giant reed populations

USDA-ARS?s Scientific Manuscript database

A study was conducted along the Rio Grande in southwest Texas to evaluate color-infrared aerial photography combined with supervised image analysis to quantify changes in giant reed (Arundo donax L.) populations over a 6-year period. Aerial photographs from 2002 and 2008 of the same seven study site...

Detection and clustering of features in aerial images by neuron network-based algorithm

NASA Astrophysics Data System (ADS)

Vozenilek, Vit

2015-12-01

The paper presents the algorithm for detection and clustering of feature in aerial photographs based on artificial neural networks. The presented approach is not focused on the detection of specific topographic features, but on the combination of general features analysis and their use for clustering and backward projection of clusters to aerial image. The basis of the algorithm is a calculation of the total error of the network and a change of weights of the network to minimize the error. A classic bipolar sigmoid was used for the activation function of the neurons and the basic method of backpropagation was used for learning. To verify that a set of features is able to represent the image content from the user's perspective, the web application was compiled (ASP.NET on the Microsoft .NET platform). The main achievements include the knowledge that man-made objects in aerial images can be successfully identified by detection of shapes and anomalies. It was also found that the appropriate combination of comprehensive features that describe the colors and selected shapes of individual areas can be useful for image analysis.

Metrological digital audio reconstruction

DOEpatents

Fadeyev,; Vitaliy, Haber [Berkeley, CA; Carl, [Berkeley, CA

2004-02-19

Audio information stored in the undulations of grooves in a medium such as a phonograph record may be reconstructed, with little or no contact, by measuring the groove shape using precision metrology methods coupled with digital image processing and numerical analysis. The effects of damage, wear, and contamination may be compensated, in many cases, through image processing and analysis methods. The speed and data handling capacity of available computing hardware make this approach practical. Two examples used a general purpose optical metrology system to study a 50 year old 78 r.p.m. phonograph record and a commercial confocal scanning probe to study a 1920's celluloid Edison cylinder. Comparisons are presented with stylus playback of the samples and with a digitally re-mastered version of an original magnetic recording. There is also a more extensive implementation of this approach, with dedicated hardware and software.

Assessing the performance of aerial image point cloud and spectral metrics in predicting boreal forest canopy cover

NASA Astrophysics Data System (ADS)

Melin, M.; Korhonen, L.; Kukkonen, M.; Packalen, P.

2017-07-01

Canopy cover (CC) is a variable used to describe the status of forests and forested habitats, but also the variable used primarily to define what counts as a forest. The estimation of CC has relied heavily on remote sensing with past studies focusing on satellite imagery as well as Airborne Laser Scanning (ALS) using light detection and ranging (lidar). Of these, ALS has been proven highly accurate, because the fraction of pulses penetrating the canopy represents a direct measurement of canopy gap percentage. However, the methods of photogrammetry can be applied to produce point clouds fairly similar to airborne lidar data from aerial images. Currently there is little information about how well such point clouds measure canopy density and gaps. The aim of this study was to assess the suitability of aerial image point clouds for CC estimation and compare the results with those obtained using spectral data from aerial images and Landsat 5. First, we modeled CC for n = 1149 lidar plots using field-measured CCs and lidar data. Next, this data was split into five subsets in north-south direction (y-coordinate). Finally, four CC models (AerialSpectral, AerialPointcloud, AerialCombi (spectral + pointcloud) and Landsat) were created and they were used to predict new CC values to the lidar plots, subset by subset, using five-fold cross validation. The Landsat and AerialSpectral models performed with RMSEs of 13.8% and 12.4%, respectively. AerialPointcloud model reached an RMSE of 10.3%, which was further improved by the inclusion of spectral data; RMSE of the AerialCombi model was 9.3%. We noticed that the aerial image point clouds managed to describe only the outermost layer of the canopy and missed the details in lower canopy, which was resulted in weak characterization of the total CC variation, especially in the tails of the data.

Looking into the water with oblique head tilting: revision of the aerial binocular imaging of underwater objects.

PubMed

Horváth, Gábor; Buchta, Krisztián; Varjú, Dezsö

2003-06-01

It is a well-known phenomenon that when we look into the water with two aerial eyes, both the apparent position and the apparent shape of underwater objects are different from the real ones because of refraction at the water surface. Earlier studies of the refraction-distorted structure of the underwater binocular visual field of aerial observers were restricted to either vertically or horizontally oriented eyes. We investigate a generalized version of this problem: We calculate the position of the binocular image point of an underwater object point viewed by two arbitrarily positioned aerial eyes, including oblique orientations of the eyes relative to the flat water surface. Assuming that binocular image fusion is performed by appropriate vergent eye movements to bring the object's image onto the foveas, the structure of the underwater binocular visual field is computed and visualized in different ways as a function of the relative positions of the eyes. We show that a revision of certain earlier treatments of the aerial imaging of underwater objects is necessary. We analyze and correct some widespread erroneous or incomplete representations of this classical geometric optical problem that occur in different textbooks. Improving the theory of aerial binocular imaging of underwater objects, we demonstrate that the structure of the underwater binocular visual field of aerial observers distorted by refraction is more complex than has been thought previously.

Design of an integrated aerial image sensor

NASA Astrophysics Data System (ADS)

Xue, Jing; Spanos, Costas J.

2005-05-01

The subject of this paper is a novel integrated aerial image sensor (IAIS) system suitable for integration within the surface of an autonomous test wafer. The IAIS could be used as a lithography processing monitor, affording a "wafer's eye view" of the process, and therefore facilitating advanced process control and diagnostics without integrating (and dedicating) the sensor to the processing equipment. The IAIS is composed of an aperture mask and an array of photo-detectors. In order to retrieve nanometer scale resolution of the aerial image with a practical photo-detector pixel size, we propose a design of an aperture mask involving a series of spatial phase "moving" aperture groups. We demonstrate a design example aimed at the 65nm technology node through TEMPEST simulation. The optimized, key design parameters include an aperture width in the range of 30nm, aperture thickness in the range of 70nm, and offer a spatial resolution of about 5nm, all with comfortable fabrication tolerances. Our preliminary simulation work indicates the possibility of the IAIS being applied to the immersion lithography. A bench-top far-field experiment verifies that our approach of the spatial frequency down-shift through forming large Moire patterns is feasible.

Application of machine learning for the evaluation of turfgrass plots using aerial images

NASA Astrophysics Data System (ADS)

Ding, Ke; Raheja, Amar; Bhandari, Subodh; Green, Robert L.

2016-05-01

Historically, investigation of turfgrass characteristics have been limited to visual ratings. Although relevant information may result from such evaluations, final inferences may be questionable because of the subjective nature in which the data is collected. Recent advances in computer vision techniques allow researchers to objectively measure turfgrass characteristics such as percent ground cover, turf color, and turf quality from the digital images. This paper focuses on developing a methodology for automated assessment of turfgrass quality from aerial images. Images of several turfgrass plots of varying quality were gathered using a camera mounted on an unmanned aerial vehicle. The quality of these plots were also evaluated based on visual ratings. The goal was to use the aerial images to generate quality evaluations on a regular basis for the optimization of water treatment. Aerial images are used to train a neural network so that appropriate features such as intensity, color, and texture of the turfgrass are extracted from these images. Neural network is a nonlinear classifier commonly used in machine learning. The output of the neural network trained model is the ratings of the grass, which is compared to the visual ratings. Currently, the quality and the color of turfgrass, measured as the greenness of the grass, are evaluated. The textures are calculated using the Gabor filter and co-occurrence matrix. Other classifiers such as support vector machines and simpler linear regression models such as Ridge regression and LARS regression are also used. The performance of each model is compared. The results show encouraging potential for using machine learning techniques for the evaluation of turfgrass quality and color.

Aberration measurement technique based on an analytical linear model of a through-focus aerial image.

PubMed

Yan, Guanyong; Wang, Xiangzhao; Li, Sikun; Yang, Jishuo; Xu, Dongbo; Erdmann, Andreas

2014-03-10

We propose an in situ aberration measurement technique based on an analytical linear model of through-focus aerial images. The aberrations are retrieved from aerial images of six isolated space patterns, which have the same width but different orientations. The imaging formulas of the space patterns are investigated and simplified, and then an analytical linear relationship between the aerial image intensity distributions and the Zernike coefficients is established. The linear relationship is composed of linear fitting matrices and rotation matrices, which can be calculated numerically in advance and utilized to retrieve Zernike coefficients. Numerical simulations using the lithography simulators PROLITH and Dr.LiTHO demonstrate that the proposed method can measure wavefront aberrations up to Z(37). Experiments on a real lithography tool confirm that our method can monitor lens aberration offset with an accuracy of 0.7 nm.

Advanced metrology by offline SEM data processing

NASA Astrophysics Data System (ADS)

Lakcher, Amine; Schneider, Loïc.; Le-Gratiet, Bertrand; Ducoté, Julien; Farys, Vincent; Besacier, Maxime

2017-06-01

Today's technology nodes contain more and more complex designs bringing increasing challenges to chip manufacturing process steps. It is necessary to have an efficient metrology to assess process variability of these complex patterns and thus extract relevant data to generate process aware design rules and to improve OPC models. Today process variability is mostly addressed through the analysis of in-line monitoring features which are often designed to support robust measurements and as a consequence are not always very representative of critical design rules. CD-SEM is the main CD metrology technique used in chip manufacturing process but it is challenged when it comes to measure metrics like tip to tip, tip to line, areas or necking in high quantity and with robustness. CD-SEM images contain a lot of information that is not always used in metrology. Suppliers have provided tools that allow engineers to extract the SEM contours of their features and to convert them into a GDS. Contours can be seen as the signature of the shape as it contains all the dimensional data. Thus the methodology is to use the CD-SEM to take high quality images then generate SEM contours and create a data base out of them. Contours are used to feed an offline metrology tool that will process them to extract different metrics. It was shown in two previous papers that it is possible to perform complex measurements on hotspots at different process steps (lithography, etch, copper CMP) by using SEM contours with an in-house offline metrology tool. In the current paper, the methodology presented previously will be expanded to improve its robustness and combined with the use of phylogeny to classify the SEM images according to their geometrical proximities.

Building block extraction and classification by means of aerial images fused with super-resolution reconstructed elevation data

NASA Astrophysics Data System (ADS)

Panagiotopoulou, Antigoni; Bratsolis, Emmanuel; Charou, Eleni; Perantonis, Stavros

2017-10-01

The detailed three-dimensional modeling of buildings utilizing elevation data, such as those provided by light detection and ranging (LiDAR) airborne scanners, is increasingly demanded today. There are certain application requirements and available datasets to which any research effort has to be adapted. Our dataset includes aerial orthophotos, with a spatial resolution 20 cm, and a digital surface model generated from LiDAR, with a spatial resolution 1 m and an elevation resolution 20 cm, from an area of Athens, Greece. The aerial images are fused with LiDAR, and we classify these data with a multilayer feedforward neural network for building block extraction. The innovation of our approach lies in the preprocessing step in which the original LiDAR data are super-resolution (SR) reconstructed by means of a stochastic regularized technique before their fusion with the aerial images takes place. The Lorentzian estimator combined with the bilateral total variation regularization performs the SR reconstruction. We evaluate the performance of our approach against that of fusing unprocessed LiDAR data with aerial images. We present the classified images and the statistical measures confusion matrix, kappa coefficient, and overall accuracy. The results demonstrate that our approach predominates over that of fusing unprocessed LiDAR data with aerial images.

Detection of Aspens Using High Resolution Aerial Laser Scanning Data and Digital Aerial Images

PubMed Central

Säynäjoki, Raita; Packalén, Petteri; Maltamo, Matti; Vehmas, Mikko; Eerikäinen, Kalle

2008-01-01

The aim was to use high resolution Aerial Laser Scanning (ALS) data and aerial images to detect European aspen (Populus tremula L.) from among other deciduous trees. The field data consisted of 14 sample plots of 30 m × 30 m size located in the Koli National Park in the North Karelia, Eastern Finland. A Canopy Height Model (CHM) was interpolated from the ALS data with a pulse density of 3.86/m2, low-pass filtered using Height-Based Filtering (HBF) and binarized to create the mask needed to separate the ground pixels from the canopy pixels within individual areas. Watershed segmentation was applied to the low-pass filtered CHM in order to create preliminary canopy segments, from which the non-canopy elements were extracted to obtain the final canopy segmentation, i.e. the ground mask was analysed against the canopy mask. A manual classification of aerial images was employed to separate the canopy segments of deciduous trees from those of coniferous trees. Finally, linear discriminant analysis was applied to the correctly classified canopy segments of deciduous trees to classify them into segments belonging to aspen and those belonging to other deciduous trees. The independent variables used in the classification were obtained from the first pulse ALS point data. The accuracy of discrimination between aspen and other deciduous trees was 78.6%. The independent variables in the classification function were the proportion of vegetation hits, the standard deviation of in pulse heights, accumulated intensity at the 90th percentile and the proportion of laser points reflected at the 60th height percentile. The accuracy of classification corresponded to the validation results of earlier ALS-based studies on the classification of individual deciduous trees to tree species. PMID:27873799

HISTORIC IMAGE: AERIAL VIEW OF THE CEMETERY AND ITS ENVIRONS. ...

Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

HISTORIC IMAGE: AERIAL VIEW OF THE CEMETERY AND ITS ENVIRONS. PHOTOGRAPH TAKEN ON 6 APRIL 1968. NCA HISTORY COLLECTION. - Rock Island National Cemetery, Rock Island Arsenal, 0.25 mile north of southern tip of Rock Island, Rock Island, Rock Island County, IL

A comparison of visual statistics for the image enhancement of FORESITE aerial images with those of major image classes

NASA Astrophysics Data System (ADS)

Jobson, Daniel J.; Rahman, Zia-ur; Woodell, Glenn A.; Hines, Glenn D.

2006-05-01

Aerial images from the Follow-On Radar, Enhanced and Synthetic Vision Systems Integration Technology Evaluation (FORESITE) flight tests with the NASA Langley Research Center's research Boeing 757 were acquired during severe haze and haze/mixed clouds visibility conditions. These images were enhanced using the Visual Servo (VS) process that makes use of the Multiscale Retinex. The images were then quantified with visual quality metrics used internally within the VS. One of these metrics, the Visual Contrast Measure, has been computed for hundreds of FORESITE images, and for major classes of imaging-terrestrial (consumer), orbital Earth observations, orbital Mars surface imaging, NOAA aerial photographs, and underwater imaging. The metric quantifies both the degree of visual impairment of the original, un-enhanced images as well as the degree of visibility improvement achieved by the enhancement process. The large aggregate data exhibits trends relating to degree of atmospheric visibility attenuation, and its impact on the limits of enhancement performance for the various image classes. Overall results support the idea that in most cases that do not involve extreme reduction in visibility, large gains in visual contrast are routinely achieved by VS processing. Additionally, for very poor visibility imaging, lesser, but still substantial, gains in visual contrast are also routinely achieved. Further, the data suggest that these visual quality metrics can be used as external standalone metrics for establishing performance parameters.

A Comparison of Visual Statistics for the Image Enhancement of FORESITE Aerial Images with Those of Major Image Classes

NASA Technical Reports Server (NTRS)

Johnson, Daniel J.; Rahman, Zia-ur; Woodell, Glenn A.; Hines, Glenn D.

2006-01-01

Aerial images from the Follow-On Radar, Enhanced and Synthetic Vision Systems Integration Technology Evaluation (FORESITE) flight tests with the NASA Langley Research Center's research Boeing 757 were acquired during severe haze and haze/mixed clouds visibility conditions. These images were enhanced using the Visual Servo (VS) process that makes use of the Multiscale Retinex. The images were then quantified with visual quality metrics used internally with the VS. One of these metrics, the Visual Contrast Measure, has been computed for hundreds of FORESITE images, and for major classes of imaging--terrestrial (consumer), orbital Earth observations, orbital Mars surface imaging, NOAA aerial photographs, and underwater imaging. The metric quantifies both the degree of visual impairment of the original, un-enhanced images as well as the degree of visibility improvement achieved by the enhancement process. The large aggregate data exhibits trends relating to degree of atmospheric visibility attenuation, and its impact on limits of enhancement performance for the various image classes. Overall results support the idea that in most cases that do not involve extreme reduction in visibility, large gains in visual contrast are routinely achieved by VS processing. Additionally, for very poor visibility imaging, lesser, but still substantial, gains in visual contrast are also routinely achieved. Further, the data suggest that these visual quality metrics can be used as external standalone metrics for establishing performance parameters.

A low-cost single-camera imaging system for aerial applicators

USDA-ARS?s Scientific Manuscript database

Agricultural aircraft provide a readily available and versatile platform for airborne remote sensing. Although various airborne imaging systems are available, most of these systems are either too expensive or too complex to be of practical use for aerial applicators. The objective of this study was ...

Integration of aerial remote sensing imaging data in a 3D-GIS environment

NASA Astrophysics Data System (ADS)

Moeller, Matthias S.

2003-03-01

For some years sensor systems have been available providing digital images of a new quality. Especially aerial stereo scanners acquire digital multispectral images with an extremely high ground resolution of about 0.10 - 0.15m and provide in addition a Digital Surface Models (DSM). These imaging products both can be used for a detailed monitoring at scales up to 1:500. The processed georeferenced multispectral orthoimages can be readily integrated into GIS making them useful for a number of applications. The DSM, derived from forward and backward facing sensors of an aerial imaging system provides a ground resolution of 0.5 m and can be used for 3D visualization purposes. In some cases it is essential, to store the ground elevation as a Digital Terrain Model (DTM) and also the height of 3-dimensional objects in a separated database. Existing automated algorithms do not work precise for the extraction of DTM from aerial scanner DSM. This paper presents a new approach which combines the visible image data and the DSM data for the generation of DTM with a reliable geometric accuracy. Already existing cadastral data can be used as a knowledge base for the extraction of building heights in cities. These elevation data is the essential source for a GIS based urban information system with a 3D visualization component.

Reducing the overlay metrology sensitivity to perturbations of the measurement stack

NASA Astrophysics Data System (ADS)

Zhou, Yue; Park, DeNeil; Gutjahr, Karsten; Gottipati, Abhishek; Vuong, Tam; Bae, Sung Yong; Stokes, Nicholas; Jiang, Aiqin; Hsu, Po Ya; O'Mahony, Mark; Donini, Andrea; Visser, Bart; de Ruiter, Chris; Grzela, Grzegorz; van der Laan, Hans; Jak, Martin; Izikson, Pavel; Morgan, Stephen

2017-03-01

Overlay metrology setup today faces a continuously changing landscape of process steps. During Diffraction Based Overlay (DBO) metrology setup, many different metrology target designs are evaluated in order to cover the full process window. The standard method for overlay metrology setup consists of single-wafer optimization in which the performance of all available metrology targets is evaluated. Without the availability of external reference data or multiwafer measurements it is hard to predict the metrology accuracy and robustness against process variations which naturally occur from wafer-to-wafer and lot-to-lot. In this paper, the capabilities of the Holistic Metrology Qualification (HMQ) setup flow are outlined, in particular with respect to overlay metrology accuracy and process robustness. The significance of robustness and its impact on overlay measurements is discussed using multiple examples. Measurement differences caused by slight stack variations across the target area, called grating imbalance, are shown to cause significant errors in the overlay calculation in case the recipe and target have not been selected properly. To this point, an overlay sensitivity check on perturbations of the measurement stack is presented for improvement of the overlay metrology setup flow. An extensive analysis on Key Performance Indicators (KPIs) from HMQ recipe optimization is performed on µDBO measurements of product wafers. The key parameters describing the sensitivity to perturbations of the measurement stack are based on an intra-target analysis. Using advanced image analysis, which is only possible for image plane detection of μDBO instead of pupil plane detection of DBO, the process robustness performance of a recipe can be determined. Intra-target analysis can be applied for a wide range of applications, independent of layers and devices.

Metrological characterization of 3D imaging devices

NASA Astrophysics Data System (ADS)

Guidi, G.

2013-04-01

Manufacturers often express the performance of a 3D imaging device in various non-uniform ways for the lack of internationally recognized standard requirements for metrological parameters able to identify the capability of capturing a real scene. For this reason several national and international organizations in the last ten years have been developing protocols for verifying such performance. Ranging from VDI/VDE 2634, published by the Association of German Engineers and oriented to the world of mechanical 3D measurements (triangulation-based devices), to the ASTM technical committee E57, working also on laser systems based on direct range detection (TOF, Phase Shift, FM-CW, flash LADAR), this paper shows the state of the art about the characterization of active range devices, with special emphasis on measurement uncertainty, accuracy and resolution. Most of these protocols are based on special objects whose shape and size are certified with a known level of accuracy. By capturing the 3D shape of such objects with a range device, a comparison between the measured points and the theoretical shape they should represent is possible. The actual deviations can be directly analyzed or some derived parameters can be obtained (e.g. angles between planes, distances between barycenters of spheres rigidly connected, frequency domain parameters, etc.). This paper shows theoretical aspects and experimental results of some novel characterization methods applied to different categories of active 3D imaging devices based on both principles of triangulation and direct range detection.

FOREWORD: Neutron metrology Neutron metrology

NASA Astrophysics Data System (ADS)

Thomas, David J.; Nolte, Ralf; Gressier, Vincent

2011-12-01

The International Committee for Weights and Measures (CIPM) has consultative committees covering various areas of metrology. The Consultative Committee for Ionizing Radiation (CCRI) differs from the others in having three sections: Section (I) deals with radiation dosimetry, Section (II) with radionuclide metrology and Section (III) with neutron metrology. In 2003 a proposal was made to publish special issues of Metrologia covering the work of the three Sections. Section (II) was the first to complete their task, and their special issue was published in 2007, volume 44(4). This was followed in 2009 by the special issue on radiation dosimetry, volume 46(2). The present issue, volume 48(6), completes the trilogy and attempts to explain neutron metrology, the youngest of the three disciplines, the neutron only having been discovered in 1932, to a wider audience and to highlight the relevance and importance of this field. When originally approached with the idea of this special issue, Section (III) immediately saw the value of a publication specifically on neutron metrology. It is a topic area where papers tend to be scattered throughout the literature in journals covering, for example, nuclear instrumentation, radiation protection or radiation measurements in general. Review articles tend to be few. People new to the field often ask for an introduction to the various topics. There are some excellent older textbooks, but these are now becoming obsolete. More experienced workers in specific areas of neutron metrology can find it difficult to know the latest position in related areas. The papers in this issue attempt, without presenting a purely historical outline, to describe the field in a sufficiently logical way to provide the novice with a clear introduction, while being sufficiently up-to-date to provide the more experienced reader with the latest scientific developments in the different topic areas. Neutron radiation fields obviously occur throughout the nuclear

Automatic Line Network Extraction from Aerial Imagery of Urban Areas through Knowledge-Based Image Analysis.

DTIC Science & Technology

1988-01-19

approach for the analysis of aerial images. In this approach image analysis is performed ast three levels of abstraction, namely iconic or low-level... image analysis , symbolic or medium-level image analysis , and semantic or high-level image analysis . Domain dependent knowledge about prototypical urban

Evaluation of 3D metrology potential using a multiple detector CDSEM

NASA Astrophysics Data System (ADS)

Hakii, Hidemitsu; Yonekura, Isao; Nishiyama, Yasushi; Tanaka, Keishi; Komoto, Kenji; Murakawa, Tsutomu; Hiroyama, Mitsuo; Shida, Soichi; Kuribara, Masayuki; Iwai, Toshimichi; Matsumoto, Jun; Nakamura, Takayuki

2012-06-01

As feature sizes of semiconductor device structures have continuously decreased, needs for metrology tools with high precision and excellent linearity over actual pattern sizes have been growing. And it has become important to measure not only two-dimensional (2D) but also three-dimensional (3D) shapes of patterns at 22 nm node and beyond. To meet requirements for 3D metrology capabilities, various pattern metrology tools have been developed. Among those, we assume that CDSEM metrology is the most qualified candidate in the light of its non-destructive, high throughput measurement capabilities that are expected to be extended to the much-awaited 3D metrology technology. On the basis of this supposition, we have developed the 3D metrology system, in which side wall angles and heights of photomask patterns can be measured with high accuracy through analyzing CDSEM images generated by multi-channel detectors. In this paper, we will discuss our attempts to measure 3D shapes of defect patterns on a photomask by using Advantest's "Multi Vision Metrology SEM" E3630 (MVM-SEM' E3630).

Preliminary results for mask metrology using spatial heterodyne interferometry

NASA Astrophysics Data System (ADS)

Bingham, Philip R.; Tobin, Kenneth; Bennett, Marylyn H.; Marmillion, Pat

2003-12-01

Spatial heterodyne interferometry (SHI) is an imaging technique that captures both the phase and amplitude of a complex wavefront in a single high-speed image. This technology was developed at the Oak Ridge National Laboratory (ORNL) and is currently being implemented for semiconductor wafer inspection by nLine Corporation. As with any system that measures phase, metrology and inspection of surface structures is possible by capturing a wavefront reflected from the surface. The interpretation of surface structure heights for metrology applications can become very difficult with the many layers of various materials used on semiconductor wafers, so inspection (defect detection) has been the primary focus for semiconductor wafers. However, masks used for photolithography typically only contain a couple well-defined materials opening the doors to high-speed mask metrology in 3 dimensions in addition to inspection. Phase shift masks often contain structures etched out of the transparent substrate material for phase shifting. While these structures are difficult to inspect using only intensity, the phase and amplitude images captured with SHI can produce very good resolution of these structures. The phase images also provide depth information that is crucial for these phase shift regions. Preliminary testing has been performed to determine the feasibility of SHI for high-speed non-contact mask metrology using a prototype SHI system with 532 nm wavelength illumination named the Visible Alpha Tool (VAT). These results show that prototype SHI system is capable of performing critical dimension measurements on 400nm lines with a repeatability of 1.4nm and line height measurements with a repeatability of 0.26nm. Additionally initial imaging of an alternating aperture phase shift mask has shown the ability of SHI to discriminate between typical phase shift heights.

Neural-network classifiers for automatic real-world aerial image recognition

NASA Astrophysics Data System (ADS)

Greenberg, Shlomo; Guterman, Hugo

1996-08-01

We describe the application of the multilayer perceptron (MLP) network and a version of the adaptive resonance theory version 2-A (ART 2-A) network to the problem of automatic aerial image recognition (AAIR). The classification of aerial images, independent of their positions and orientations, is required for automatic tracking and target recognition. Invariance is achieved by the use of different invariant feature spaces in combination with supervised and unsupervised neural networks. The performance of neural-network-based classifiers in conjunction with several types of invariant AAIR global features, such as the Fourier-transform space, Zernike moments, central moments, and polar transforms, are examined. The advantages of this approach are discussed. The performance of the MLP network is compared with that of a classical correlator. The MLP neural-network correlator outperformed the binary phase-only filter (BPOF) correlator. It was found that the ART 2-A distinguished itself with its speed and its low number of required training vectors. However, only the MLP classifier was able to deal with a combination of shift and rotation geometric distortions.

Neural-network classifiers for automatic real-world aerial image recognition.

PubMed

Greenberg, S; Guterman, H

1996-08-10

We describe the application of the multilayer perceptron (MLP) network and a version of the adaptive resonance theory version 2-A (ART 2-A) network to the problem of automatic aerial image recognition (AAIR). The classification of aerial images, independent of their positions and orientations, is required for automatic tracking and target recognition. Invariance is achieved by the use of different invariant feature spaces in combination with supervised and unsupervised neural networks. The performance of neural-network-based classifiers in conjunction with several types of invariant AAIR global features, such as the Fourier-transform space, Zernike moments, central moments, and polar transforms, are examined. The advantages of this approach are discussed. The performance of the MLP network is compared with that of a classical correlator. The MLP neural-network correlator outperformed the binary phase-only filter (BPOF) correlator. It was found that the ART 2-A distinguished itself with its speed and its low number of required training vectors. However, only the MLP classifier was able to deal with a combination of shift and rotation geometric distortions.

Development of a spectroscopic Mueller matrix imaging ellipsometer for nanostructure metrology

DOE Office of Scientific and Technical Information (OSTI.GOV)

Chen, Xiuguo; Du, Weichao; Yuan, Kui

2016-05-15

In this paper, we describe the development of a spectroscopic Mueller matrix imaging ellipsometer (MMIE), which combines the great power of Mueller matrix ellipsometry with the high spatial resolution of optical microscopy. A dual rotating-compensator configuration is adopted to collect the full 4 × 4 imaging Mueller matrix in a single measurement. The light wavelengths are scanned in the range of 400–700 nm by a monochromator. The instrument has measurement accuracy and precision better than 0.01 for all the Mueller matrix elements in both the whole image and the whole spectral range. The instrument was then applied for the measurementmore » of nanostructures combined with an inverse diffraction problem solving technique. The experiment performed on a photoresist grating sample has demonstrated the great potential of MMIE for accurate grating reconstruction from spectral data collected by a single pixel of the camera and for efficient quantification of geometrical profile of the grating structure over a large area with pixel resolution. It is expected that MMIE will be a powerful tool for nanostructure metrology in future high-volume nanomanufacturing.« less

Enhanced resolution and accuracy of freeform metrology through Subaperture Stitching Interferometry

NASA Astrophysics Data System (ADS)

Supranowitz, Chris; Maloney, Chris; Murphy, Paul; Dumas, Paul

2017-10-01

Recent advances in polishing and metrology have addressed many of the challenges in the fabrication and metrology of freeform surfaces, and the manufacture of these surfaces is possible today. However, achieving the form and mid-spatial frequency (MSF) specifications that are typical of visible imaging systems remains a challenge. Interferometric metrology for freeform surfaces is thus highly desirable for such applications, but the capability is currently quite limited for freeforms. In this paper, we provide preliminary results that demonstrate accurate, high-resolution measurements of freeform surfaces using prototype software on QED's ASI™ (Aspheric Stitching Interferometer).

Image-based overlay and alignment metrology through optically opaque media with sub-surface probe microscopy

NASA Astrophysics Data System (ADS)

van Es, Maarten H.; Mohtashami, Abbas; Piras, Daniele; Sadeghian, Hamed

2018-03-01

Nondestructive subsurface nanoimaging through optically opaque media is considered to be extremely challenging and is essential for several semiconductor metrology applications including overlay and alignment and buried void and defect characterization. The current key challenge in overlay and alignment is the measurement of targets that are covered by optically opaque layers. Moreover, with the device dimensions moving to the smaller nodes and the issue of the so-called loading effect causing offsets between between targets and product features, it is increasingly desirable to perform alignment and overlay on product features or so-called on-cell overlay, which requires higher lateral resolution than optical methods can provide. Our recently developed technique known as SubSurface Ultrasonic Resonance Force Microscopy (SSURFM) has shown the capability for high-resolution imaging of structures below a surface based on (visco-)elasticity of the constituent materials and as such is a promising technique to perform overlay and alignment with high resolution in upcoming production nodes. In this paper, we describe the developed SSURFM technique and the experimental results on imaging buried features through various layers and the ability to detect objects with resolution below 10 nm. In summary, the experimental results show that the SSURFM is a potential solution for on-cell overlay and alignment as well as detecting buried defects or voids and generally metrology through optically opaque layers.

Registration of Aerial Optical Images with LiDAR Data Using the Closest Point Principle and Collinearity Equations.

PubMed

Huang, Rongyong; Zheng, Shunyi; Hu, Kun

2018-06-01

Registration of large-scale optical images with airborne LiDAR data is the basis of the integration of photogrammetry and LiDAR. However, geometric misalignments still exist between some aerial optical images and airborne LiDAR point clouds. To eliminate such misalignments, we extended a method for registering close-range optical images with terrestrial LiDAR data to a variety of large-scale aerial optical images and airborne LiDAR data. The fundamental principle is to minimize the distances from the photogrammetric matching points to the terrestrial LiDAR data surface. Except for the satisfactory efficiency of about 79 s per 6732 × 8984 image, the experimental results also show that the unit weighted root mean square (RMS) of the image points is able to reach a sub-pixel level (0.45 to 0.62 pixel), and the actual horizontal and vertical accuracy can be greatly improved to a high level of 1/4⁻1/2 (0.17⁻0.27 m) and 1/8⁻1/4 (0.10⁻0.15 m) of the average LiDAR point distance respectively. Finally, the method is proved to be more accurate, feasible, efficient, and practical in variety of large-scale aerial optical image and LiDAR data.

Implementation and performance of the metrology system for the multi-object optical and near-infrared spectrograph MOONS

NASA Astrophysics Data System (ADS)

Drass, Holger; Vanzi, Leonardo; Torres-Torriti, Miguel; Dünner, Rolando; Shen, Tzu-Chiang; Belmar, Francisco; Dauvin, Lousie; Staig, Tomás.; Antognini, Jonathan; Flores, Mauricio; Luco, Yerko; Béchet, Clémentine; Boettger, David; Beard, Steven; Montgomery, David; Watson, Stephen; Cabral, Alexandre; Hayati, Mahmoud; Abreu, Manuel; Rees, Phil; Cirasuolo, Michele; Taylor, William; Fairley, Alasdair

2016-08-01

The Multi-Object Optical and Near-infrared Spectrograph (MOONS) will cover the Very Large Telescope's (VLT) field of view with 1000 fibres. The fibres will be mounted on fibre positioning units (FPU) implemented as two-DOF robot arms to ensure a homogeneous coverage of the 500 square arcmin field of view. To accurately and fast determine the position of the 1000 fibres a metrology system has been designed. This paper presents the hardware and software design and performance of the metrology system. The metrology system is based on the analysis of images taken by a circular array of 12 cameras located close to the VLTs derotator ring around the Nasmyth focus. The system includes 24 individually adjustable lamps. The fibre positions are measured through dedicated metrology targets mounted on top of the FPUs and fiducial markers connected to the FPU support plate which are imaged at the same time. A flexible pipeline based on VLT standards is used to process the images. The position accuracy was determined to 5 μm in the central region of the images. Including the outer regions the overall positioning accuracy is 25 μm. The MOONS metrology system is fully set up with a working prototype. The results in parts of the images are already excellent. By using upcoming hardware and improving the calibration it is expected to fulfil the accuracy requirement over the complete field of view for all metrology cameras.

Advanced Mathematical Tools in Metrology III

NASA Astrophysics Data System (ADS)

Ciarlini, P.

The Table of Contents for the book is as follows: * Foreword * Invited Papers * The ISO Guide to the Expression of Uncertainty in Measurement: A Bridge between Statistics and Metrology * Bootstrap Algorithms and Applications * The TTRSs: 13 Oriented Constraints for Dimensioning, Tolerancing & Inspection * Graded Reference Data Sets and Performance Profiles for Testing Software Used in Metrology * Uncertainty in Chemical Measurement * Mathematical Methods for Data Analysis in Medical Applications * High-Dimensional Empirical Linear Prediction * Wavelet Methods in Signal Processing * Software Problems in Calibration Services: A Case Study * Robust Alternatives to Least Squares * Gaining Information from Biomagnetic Measurements * Full Papers * Increase of Information in the Course of Measurement * A Framework for Model Validation and Software Testing in Regression * Certification of Algorithms for Determination of Signal Extreme Values during Measurement * A Method for Evaluating Trends in Ozone-Concentration Data and Its Application to Data from the UK Rural Ozone Monitoring Network * Identification of Signal Components by Stochastic Modelling in Measurements of Evoked Magnetic Fields from Peripheral Nerves * High Precision 3D-Calibration of Cylindrical Standards * Magnetic Dipole Estimations for MCG-Data * Transfer Functions of Discrete Spline Filters * An Approximation Method for the Linearization of Tridimensional Metrology Problems * Regularization Algorithms for Image Reconstruction from Projections * Quality of Experimental Data in Hydrodynamic Research * Stochastic Drift Models for the Determination of Calibration Intervals * Short Communications * Projection Method for Lidar Measurement * Photon Flux Measurements by Regularised Solution of Integral Equations * Correct Solutions of Fit Problems in Different Experimental Situations * An Algorithm for the Nonlinear TLS Problem in Polynomial Fitting * Designing Axially Symmetric Electromechanical Systems of

Industrial graphene metrology.

PubMed

Kyle, Jennifer Reiber; Ozkan, Cengiz S; Ozkan, Mihrimah

2012-07-07

Graphene is an allotrope of carbon whose structure is based on one-atom-thick planar sheets of carbon atoms that are densely packed in a honeycomb crystal lattice. Its unique electrical and optical properties raised worldwide interest towards the design and fabrication of future electronic and optical devices with unmatched performance. At the moment, extensive efforts are underway to evaluate the reliability and performance of a number of such devices. With the recent advances in synthesizing large-area graphene sheets, engineers have begun investigating viable methodologies for conducting graphene metrology and quality control at industrial scales to understand a variety of reliability issues including defects, patternability, electrical, and physical properties. This review summarizes the current state of industrial graphene metrology and provides an overview of graphene metrology techniques. In addition, a recently developed large-area graphene metrology technique based on fluorescence quenching is introduced. For each metrology technique, the industrial metrics it measures are identified--layer thickness, edge structure, defects, Fermi level, and thermal conductivity--and a detailed description is provided as to how the measurements are performed. Additionally, the potential advantages of each technique for industrial use are identified, including throughput, scalability, sensitivity to substrate/environment, and on their demonstrated ability to achieve quantified results. The recently developed fluorescence-quenching metrology technique is shown to meet all the necessary criteria for industrial applications, rendering it the first industry-ready graphene metrology technique.

Film cameras or digital sensors? The challenge ahead for aerial imaging

USGS Publications Warehouse

Light, D.L.

1996-01-01

Cartographic aerial cameras continue to play the key role in producing quality products for the aerial photography business, and specifically for the National Aerial Photography Program (NAPP). One NAPP photograph taken with cameras capable of 39 lp/mm system resolution can contain the equivalent of 432 million pixels at 11 ??m spot size, and the cost is less than $75 per photograph to scan and output the pixels on a magnetic storage medium. On the digital side, solid state charge coupled device linear and area arrays can yield quality resolution (7 to 12 ??m detector size) and a broader dynamic range. If linear arrays are to compete with film cameras, they will require precise attitude and positioning of the aircraft so that the lines of pixels can be unscrambled and put into a suitable homogeneous scene that is acceptable to an interpreter. Area arrays need to be much larger than currently available to image scenes competitive in size with film cameras. Analysis of the relative advantages and disadvantages of the two systems show that the analog approach is more economical at present. However, as arrays become larger, attitude sensors become more refined, global positioning system coordinate readouts become commonplace, and storage capacity becomes more affordable, the digital camera may emerge as the imaging system for the future. Several technical challenges must be overcome if digital sensors are to advance to where they can support mapping, charting, and geographic information system applications.

Massive metrology using fast e-beam technology improves OPC model accuracy by >2x at faster turnaround time

NASA Astrophysics Data System (ADS)

Zhao, Qian; Wang, Lei; Wang, Jazer; Wang, ChangAn; Shi, Hong-Fei; Guerrero, James; Feng, Mu; Zhang, Qiang; Liang, Jiao; Guo, Yunbo; Zhang, Chen; Wallow, Tom; Rio, David; Wang, Lester; Wang, Alvin; Wang, Jen-Shiang; Gronlund, Keith; Lang, Jun; Koh, Kar Kit; Zhang, Dong Qing; Zhang, Hongxin; Krishnamurthy, Subramanian; Fei, Ray; Lin, Chiawen; Fang, Wei; Wang, Fei

2018-03-01

Classical SEM metrology, CD-SEM, uses low data rate and extensive frame-averaging technique to achieve high-quality SEM imaging for high-precision metrology. The drawbacks include prolonged data collection time and larger photoresist shrinkage due to excess electron dosage. This paper will introduce a novel e-beam metrology system based on a high data rate, large probe current, and ultra-low noise electron optics design. At the same level of metrology precision, this high speed e-beam metrology system could significantly shorten data collection time and reduce electron dosage. In this work, the data collection speed is higher than 7,000 images per hr. Moreover, a novel large field of view (LFOV) capability at high resolution was enabled by an advanced electron deflection system design. The area coverage by LFOV is >100x larger than classical SEM. Superior metrology precision throughout the whole image has been achieved, and high quality metrology data could be extracted from full field. This new capability on metrology will further improve metrology data collection speed to support the need for large volume of metrology data from OPC model calibration of next generation technology. The shrinking EPE (Edge Placement Error) budget places more stringent requirement on OPC model accuracy, which is increasingly limited by metrology errors. In the current practice of metrology data collection and data processing to model calibration flow, CD-SEM throughput becomes a bottleneck that limits the amount of metrology measurements available for OPC model calibration, impacting pattern coverage and model accuracy especially for 2D pattern prediction. To address the trade-off in metrology sampling and model accuracy constrained by the cycle time requirement, this paper employs the high speed e-beam metrology system and a new computational software solution to take full advantage of the large volume data and significantly reduce both systematic and random metrology errors. The

Comparison of line shortening assessed by aerial image and wafer measurements

NASA Astrophysics Data System (ADS)

Ziegler, Wolfram; Pforr, Rainer; Thiele, Joerg; Maurer, Wilhelm

1997-02-01

Increasing number of patterns per area and decreasing linewidth demand enhancement technologies for optical lithography. OPC, the correction of systematic non-linearity in the pattern transfer process by correction of design data is one possibility to tighten process control and to increase the lifetime of existing lithographic equipment. The two most prominent proximity effects to be corrected by OPC are CD variation and line shortening. Line shortening measured on a wafer is up to 2 times larger than full resist simulation results. Therefore, the influence of mask geometry to line shortening is a key item to parameterize lithography. The following paper discusses the effect of adding small serifs to line ends with 0.25 micrometer ground-rule design. For reticles produced on an ALTA 3000 with standard wet etch process, the corner rounding on them mask can be reduced by adding serifs of a certain size. The corner rounding was measured and the effect on line shortening on the wafer is determined. This was investigated by resist measurements on wafer, aerial image plus resist simulation and aerial image measurements on the AIMS microscope.

CSAM Metrology Software Tool

NASA Technical Reports Server (NTRS)

Vu, Duc; Sandor, Michael; Agarwal, Shri

2005-01-01

CSAM Metrology Software Tool (CMeST) is a computer program for analysis of false-color CSAM images of plastic-encapsulated microcircuits. (CSAM signifies C-mode scanning acoustic microscopy.) The colors in the images indicate areas of delamination within the plastic packages. Heretofore, the images have been interpreted by human examiners. Hence, interpretations have not been entirely consistent and objective. CMeST processes the color information in image-data files to detect areas of delamination without incurring inconsistencies of subjective judgement. CMeST can be used to create a database of baseline images of packages acquired at given times for comparison with images of the same packages acquired at later times. Any area within an image can be selected for analysis, which can include examination of different delamination types by location. CMeST can also be used to perform statistical analyses of image data. Results of analyses are available in a spreadsheet format for further processing. The results can be exported to any data-base-processing software.

Point Cloud Generation from Aerial Image Data Acquired by a Quadrocopter Type Micro Unmanned Aerial Vehicle and a Digital Still Camera

PubMed Central

Rosnell, Tomi; Honkavaara, Eija

2012-01-01

The objective of this investigation was to develop and investigate methods for point cloud generation by image matching using aerial image data collected by quadrocopter type micro unmanned aerial vehicle (UAV) imaging systems. Automatic generation of high-quality, dense point clouds from digital images by image matching is a recent, cutting-edge step forward in digital photogrammetric technology. The major components of the system for point cloud generation are a UAV imaging system, an image data collection process using high image overlaps, and post-processing with image orientation and point cloud generation. Two post-processing approaches were developed: one of the methods is based on Bae Systems’ SOCET SET classical commercial photogrammetric software and another is built using Microsoft®’s Photosynth™ service available in the Internet. Empirical testing was carried out in two test areas. Photosynth processing showed that it is possible to orient the images and generate point clouds fully automatically without any a priori orientation information or interactive work. The photogrammetric processing line provided dense and accurate point clouds that followed the theoretical principles of photogrammetry, but also some artifacts were detected. The point clouds from the Photosynth processing were sparser and noisier, which is to a large extent due to the fact that the method is not optimized for dense point cloud generation. Careful photogrammetric processing with self-calibration is required to achieve the highest accuracy. Our results demonstrate the high performance potential of the approach and that with rigorous processing it is possible to reach results that are consistent with theory. We also point out several further research topics. Based on theoretical and empirical results, we give recommendations for properties of imaging sensor, data collection and processing of UAV image data to ensure accurate point cloud generation. PMID:22368479

Point cloud generation from aerial image data acquired by a quadrocopter type micro unmanned aerial vehicle and a digital still camera.

PubMed

Rosnell, Tomi; Honkavaara, Eija

2012-01-01

The objective of this investigation was to develop and investigate methods for point cloud generation by image matching using aerial image data collected by quadrocopter type micro unmanned aerial vehicle (UAV) imaging systems. Automatic generation of high-quality, dense point clouds from digital images by image matching is a recent, cutting-edge step forward in digital photogrammetric technology. The major components of the system for point cloud generation are a UAV imaging system, an image data collection process using high image overlaps, and post-processing with image orientation and point cloud generation. Two post-processing approaches were developed: one of the methods is based on Bae Systems' SOCET SET classical commercial photogrammetric software and another is built using Microsoft(®)'s Photosynth™ service available in the Internet. Empirical testing was carried out in two test areas. Photosynth processing showed that it is possible to orient the images and generate point clouds fully automatically without any a priori orientation information or interactive work. The photogrammetric processing line provided dense and accurate point clouds that followed the theoretical principles of photogrammetry, but also some artifacts were detected. The point clouds from the Photosynth processing were sparser and noisier, which is to a large extent due to the fact that the method is not optimized for dense point cloud generation. Careful photogrammetric processing with self-calibration is required to achieve the highest accuracy. Our results demonstrate the high performance potential of the approach and that with rigorous processing it is possible to reach results that are consistent with theory. We also point out several further research topics. Based on theoretical and empirical results, we give recommendations for properties of imaging sensor, data collection and processing of UAV image data to ensure accurate point cloud generation.

Integrated remote sensing and visualization (IRSV) system for transportation infrastructure operations and management, phase two, volume 5 : aerial bridge deck imaging data collection and software revision.

DOT National Transportation Integrated Search

2012-02-01

For rapid deployment of bridge scan missions, sub-inch aerial imaging using small format aerial photography : is suggested. Under-belly photography is used to generate high resolution aerial images that can be geo-referenced and : used for quantifyin...

Density estimation in aerial images of large crowds for automatic people counting

NASA Astrophysics Data System (ADS)

Herrmann, Christian; Metzler, Juergen

2013-05-01

Counting people is a common topic in the area of visual surveillance and crowd analysis. While many image-based solutions are designed to count only a few persons at the same time, like pedestrians entering a shop or watching an advertisement, there is hardly any solution for counting large crowds of several hundred persons or more. We addressed this problem previously by designing a semi-automatic system being able to count crowds consisting of hundreds or thousands of people based on aerial images of demonstrations or similar events. This system requires major user interaction to segment the image. Our principle aim is to reduce this manual interaction. To achieve this, we propose a new and automatic system. Besides counting the people in large crowds, the system yields the positions of people allowing a plausibility check by a human operator. In order to automatize the people counting system, we use crowd density estimation. The determination of crowd density is based on several features like edge intensity or spatial frequency. They indicate the density and discriminate between a crowd and other image regions like buildings, bushes or trees. We compare the performance of our automatic system to the previous semi-automatic system and to manual counting in images. By counting a test set of aerial images showing large crowds containing up to 12,000 people, the performance gain of our new system will be measured. By improving our previous system, we will increase the benefit of an image-based solution for counting people in large crowds.

Development of the metrology and imaging of cellulose nanocrystals

NASA Astrophysics Data System (ADS)

Postek, Michael T.; Vladár, András; Dagata, John; Farkas, Natalia; Ming, Bin; Wagner, Ryan; Raman, Arvind; Moon, Robert J.; Sabo, Ronald; Wegner, Theodore H.; Beecher, James

2011-02-01

The development of metrology for nanoparticles is a significant challenge. Cellulose nanocrystals (CNCs) are one group of nanoparticles that have high potential economic value but present substantial challenges to the development of the measurement science. Even the largest trees owe their strength to this newly appreciated class of nanomaterials. Cellulose is the world's most abundant natural, renewable, biodegradable polymer. Cellulose occurs as whisker-like microfibrils that are biosynthesized and deposited in plant material in a continuous fashion. The nanocrystals are isolated by hydrolyzing away the amorphous segments leaving the acid resistant crystalline fragments. Therefore, the basic raw material for new nanomaterial products already abounds in nature and is available to be utilized in an array of future materials. However, commercialization requires the development of efficient manufacturing processes and nanometrology to monitor quality. This paper discusses some of the instrumentation, metrology and standards issues associated with the ramping up for production and use of CNCs.

a New Paradigm for Matching - and Aerial Images

NASA Astrophysics Data System (ADS)

Koch, T.; Zhuo, X.; Reinartz, P.; Fraundorfer, F.

2016-06-01

This paper investigates the performance of SIFT-based image matching regarding large differences in image scaling and rotation, as this is usually the case when trying to match images captured from UAVs and airplanes. This task represents an essential step for image registration and 3d-reconstruction applications. Various real world examples presented in this paper show that SIFT, as well as A-SIFT perform poorly or even fail in this matching scenario. Even if the scale difference in the images is known and eliminated beforehand, the matching performance suffers from too few feature point detections, ambiguous feature point orientations and rejection of many correct matches when applying the ratio-test afterwards. Therefore, a new feature matching method is provided that overcomes these problems and offers thousands of matches by a novel feature point detection strategy, applying a one-to-many matching scheme and substitute the ratio-test by adding geometric constraints to achieve geometric correct matches at repetitive image regions. This method is designed for matching almost nadir-directed images with low scene depth, as this is typical in UAV and aerial image matching scenarios. We tested the proposed method on different real world image pairs. While standard SIFT failed for most of the datasets, plenty of geometrical correct matches could be found using our approach. Comparing the estimated fundamental matrices and homographies with ground-truth solutions, mean errors of few pixels can be achieved.

First demonstration of aerial gamma-ray imaging using drone for prompt radiation survey in Fukushima

NASA Astrophysics Data System (ADS)

Mochizuki, S.; Kataoka, J.; Tagawa, L.; Iwamoto, Y.; Okochi, H.; Katsumi, N.; Kinno, S.; Arimoto, M.; Maruhashi, T.; Fujieda, K.; Kurihara, T.; Ohsuka, S.

2017-11-01

Considerable amounts of radioactive substances (mainly 137Cs and 134Cs) were released into the environment after the Japanese nuclear disaster in 2011. Some restrictions on residence areas were lifted in April 2017, owing to the successive and effective decontamination operations. However, the distribution of radioactive substances in vast areas of mountain, forest and satoyama close to the city is still unknown; thus, decontamination operations in such areas are being hampered. In this paper, we report on the first aerial gamma-ray imaging of a schoolyard in Fukushima using a drone that carries a high sensitivity Compton camera. We show that the distribution of 137Cs in regions with a diameter of several tens to a hundred meters can be imaged with a typical resolution of 2-5 m within a 10-20 min flights duration. The aerial gamma-ray images taken 10 m and 20 m above the ground are qualitatively consistent with a dose map reconstructed from the ground-based measurements using a survey meter. Although further quantification is needed for the distance and air-absorption corrections to derive in situ dose map, such an aerial drone system can reduce measurement time by a factor of ten and is suitable for place where ground-based measurement are difficult.

Looking for an old aerial photograph

USGS Publications Warehouse

,

1997-01-01

Attempts to photograph the surface of the Earth date from the 1800's, when photographers attached cameras to balloons, kites, and even pigeons. Today, aerial photographs and satellite images are commonplace. The rate of acquiring aerial photographs and satellite images has increased rapidly in recent years. Views of the Earth obtained from aircraft or satellites have become valuable tools to Government resource planners and managers, land-use experts, environmentalists, engineers, scientists, and a wide variety of other users. Many people want historical aerial photographs for business or personal reasons. They may want to locate the boundaries of an old farm or a piece of family property. Or they may want a photograph as a record of changes in their neighborhood, or as a gift. The U.S. Geological Survey (USGS) maintains the Earth Science Information Centers (ESIC?s) to sell aerial photographs, remotely sensed images from satellites, a wide array of digital geographic and cartographic data, as well as the Bureau?s wellknown maps. Declassified photographs from early spy satellites were recently added to the ESIC offerings of historical images. Using the Aerial Photography Summary Record System database, ESIC researchers can help customers find imagery in the collections of other Federal agencies and, in some cases, those of private companies that specialize in esoteric products.

Development of the metrology and imaging of cellulose nanocrystals

Treesearch

Michael T. Postek; Andras Vladar; John Dagata; Natalia Farkas; Bin Ming; Ryan Wagner; Arvind Raman; Robert J. Moon; Ronald Sabo; Theodore H. Wegner; James Beecher

2011-01-01

The development of metrology for nanoparticles is a significant challenge. Cellulose nanocrystals (CNCs) are one group of nanoparticles that have high potential economic value but present substantial challenges to the development of the measurement science. Even the largest trees owe their strength to this newly appreciated class of nanomaterials. Cellulose is the...

Integration of aerial imaging and variable-rate technology for site-specific aerial herbicide application

USDA-ARS?s Scientific Manuscript database

As remote sensing and variable rate technology are becoming more available for aerial applicators, practical methodologies on effective integration of these technologies are needed for site-specific aerial applications of crop production and protection materials. The objectives of this study were to...

Two-dimensional simulation and modeling in scanning electron microscope imaging and metrology research.

PubMed

Postek, Michael T; Vladár, András E; Lowney, Jeremiah R; Keery, William J

2002-01-01

Traditional Monte Carlo modeling of the electron beam-specimen interactions in a scanning electron microscope (SEM) produces information about electron beam penetration and output signal generation at either a single beam-landing location, or multiple landing positions. If the multiple landings lie on a line, the results can be graphed in a line scan-like format. Monte Carlo results formatted as line scans have proven useful in providing one-dimensional information about the sample (e.g., linewidth). When used this way, this process is called forward line scan modeling. In the present work, the concept of image simulation (or the first step in the inverse modeling of images) is introduced where the forward-modeled line scan data are carried one step further to construct theoretical two-dimensional (2-D) micrographs (i.e., theoretical SEM images) for comparison with similar experimentally obtained micrographs. This provides an ability to mimic and closely match theory and experiment using SEM images. Calculated and/or measured libraries of simulated images can be developed with this technique. The library concept will prove to be very useful in the determination of dimensional and other properties of simple structures, such as integrated circuit parts, where the shape of the features is preferably measured from a single top-down image or a line scan. This paper presents one approach to the generation of 2-D simulated images and presents some suggestions as to their application to critical dimension metrology.

Digital Image Correlation: Metrological Characterization in Mechanical Analysis

NASA Astrophysics Data System (ADS)

Petrella, Orsola; Signore, Davide; Caramuta, Pietro; Toscano, Cinzia; Ferraiuolo, Michele

2017-04-01

The Digital Image Correlation (DIC) is a newly developed optical technique that is spreading in all engineering sectors because it allows the non-destructive estimation of the entire surface deformation without any contact with the component under analysis. These characteristics make the DIC very appealing in all the cases the global deformation state is to be known without using strain gages, which are the most used measuring device. The DIC is applicable to any material subjected to distortion caused by either thermal or mechanical load, allowing to obtain high-definition mapping of displacements and deformations. That is why in the civil and the transportation industry, DIC is very useful for studying the behavior of metallic materials as well as of composite materials. DIC is also used in the medical field for the characterization of the local strain field of the vascular tissues surface subjected to uniaxial tensile loading. DIC can be carried out in the two dimension mode (2D DIC) if a single camera is used or in a three dimension mode (3D DIC) if two cameras are involved. Each point of the test surface framed by the cameras can be associated with a specific pixel of the image and the coordinates of each point are calculated knowing the relative distance between the two cameras together with their orientation. In both arrangements, when a component is subjected to a load, several images related to different deformation states can be are acquired through the cameras. A specific software analyzes the images via the mutual correlation between the reference image (obtained without any applied load) and those acquired during the deformation giving the relative displacements. In this paper, a Metrological Characterization of the Digital Image Correlation is performed on aluminum and composite targets both in static and dynamic loading conditions by comparison between DIC and strain gauges measures. In the static test, interesting results have been obtained thanks

Direct Penguin Counting Using Unmanned Aerial Vehicle Image

NASA Astrophysics Data System (ADS)

Hyun, C. U.; Kim, H. C.; Kim, J. H.; Hong, S. G.

2015-12-01

This study presents an application of unmanned aerial vehicle (UAV) images to monitor penguin colony in Baton Peninsula, King George Island, Antarctica. The area around Narębski Point located on the southeast coast of Barton Peninsula was designated as Antarctic Specially Protected Area No. 171 (ASPA 171), and Chinstrap and Gentoo penguins inhabit in this area. The UAV images were acquired in a part of ASPA 171 from four flights in a single day, Jan 18, 2014. About 360 images were mosaicked as an image of about 3 cm spatial resolution and then a subset including representative penguin rookeries was selected. The subset image was segmented based on gradient map of pixel values, and spectral and spatial attributes were assigned to each segment. The object based image analysis (OBIA) was conducted with consideration of spectral attributes including mean and minimum values of each segment and various shape attributes such as area, length, compactness and roundness to detect individual penguin. The segments indicating individual penguin were effectively detected on rookeries with high contrasts in the spectral and shape attributes. The importance of periodic and precise monitoring of penguins has been recognized because variations of their populations reflect environmental changes and disturbance from human activities. Utilization of very high resolution imaging method shown in this study can be applied to other penguin habitats in Antarctica, and the results will be able to support establishing effective environmental management plans.

3D Power Line Extraction from Multiple Aerial Images.

PubMed

Oh, Jaehong; Lee, Changno

2017-09-29

Power lines are cables that carry electrical power from a power plant to an electrical substation. They must be connected between the tower structures in such a way that ensures minimum tension and sufficient clearance from the ground. Power lines can stretch and sag with the changing weather, eventually exceeding the planned tolerances. The excessive sags can then cause serious accidents, while hindering the durability of the power lines. We used photogrammetric techniques with a low-cost drone to achieve efficient 3D mapping of power lines that are often difficult to approach. Unlike the conventional image-to-object space approach, we used the object-to-image space approach using cubic grid points. We processed four strips of aerial images to automatically extract the power line points in the object space. Experimental results showed that the approach could successfully extract the positions of the power line points for power line generation and sag measurement with the elevation accuracy of a few centimeters.

3D Power Line Extraction from Multiple Aerial Images

PubMed Central

Lee, Changno

2017-01-01

Power lines are cables that carry electrical power from a power plant to an electrical substation. They must be connected between the tower structures in such a way that ensures minimum tension and sufficient clearance from the ground. Power lines can stretch and sag with the changing weather, eventually exceeding the planned tolerances. The excessive sags can then cause serious accidents, while hindering the durability of the power lines. We used photogrammetric techniques with a low-cost drone to achieve efficient 3D mapping of power lines that are often difficult to approach. Unlike the conventional image-to-object space approach, we used the object-to-image space approach using cubic grid points. We processed four strips of aerial images to automatically extract the power line points in the object space. Experimental results showed that the approach could successfully extract the positions of the power line points for power line generation and sag measurement with the elevation accuracy of a few centimeters. PMID:28961204

Parametric boundary reconstruction algorithm for industrial CT metrology application.

PubMed

Yin, Zhye; Khare, Kedar; De Man, Bruno

2009-01-01

High-energy X-ray computed tomography (CT) systems have been recently used to produce high-resolution images in various nondestructive testing and evaluation (NDT/NDE) applications. The accuracy of the dimensional information extracted from CT images is rapidly approaching the accuracy achieved with a coordinate measuring machine (CMM), the conventional approach to acquire the metrology information directly. On the other hand, CT systems generate the sinogram which is transformed mathematically to the pixel-based images. The dimensional information of the scanned object is extracted later by performing edge detection on reconstructed CT images. The dimensional accuracy of this approach is limited by the grid size of the pixel-based representation of CT images since the edge detection is performed on the pixel grid. Moreover, reconstructed CT images usually display various artifacts due to the underlying physical process and resulting object boundaries from the edge detection fail to represent the true boundaries of the scanned object. In this paper, a novel algorithm to reconstruct the boundaries of an object with uniform material composition and uniform density is presented. There are three major benefits in the proposed approach. First, since the boundary parameters are reconstructed instead of image pixels, the complexity of the reconstruction algorithm is significantly reduced. The iterative approach, which can be computationally intensive, will be practical with the parametric boundary reconstruction. Second, the object of interest in metrology can be represented more directly and accurately by the boundary parameters instead of the image pixels. By eliminating the extra edge detection step, the overall dimensional accuracy and process time can be improved. Third, since the parametric reconstruction approach shares the boundary representation with other conventional metrology modalities such as CMM, boundary information from other modalities can be directly

Advanced Image Processing of Aerial Imagery

NASA Technical Reports Server (NTRS)

Woodell, Glenn; Jobson, Daniel J.; Rahman, Zia-ur; Hines, Glenn

2006-01-01

Aerial imagery of the Earth is an invaluable tool for the assessment of ground features, especially during times of disaster. Researchers at the NASA Langley Research Center have developed techniques which have proven to be useful for such imagery. Aerial imagery from various sources, including Langley's Boeing 757 Aries aircraft, has been studied extensively. This paper discusses these studies and demonstrates that better-than-observer imagery can be obtained even when visibility is severely compromised. A real-time, multi-spectral experimental system will be described and numerous examples will be shown.

Coherent X-ray beam metrology using 2D high-resolution Fresnel-diffraction analysis.

PubMed

Ruiz-Lopez, M; Faenov, A; Pikuz, T; Ozaki, N; Mitrofanov, A; Albertazzi, B; Hartley, N; Matsuoka, T; Ochante, Y; Tange, Y; Yabuuchi, T; Habara, T; Tanaka, K A; Inubushi, Y; Yabashi, M; Nishikino, M; Kawachi, T; Pikuz, S; Ishikawa, T; Kodama, R; Bleiner, D

2017-01-01

Direct metrology of coherent short-wavelength beamlines is important for obtaining operational beam characteristics at the experimental site. However, since beam-time limitation imposes fast metrology procedures, a multi-parametric metrology from as low as a single shot is desirable. Here a two-dimensional (2D) procedure based on high-resolution Fresnel diffraction analysis is discussed and applied, which allowed an efficient and detailed beamline characterization at the SACLA XFEL. So far, the potential of Fresnel diffraction for beamline metrology has not been fully exploited because its high-frequency fringes could be only partly resolved with ordinary pixel-limited detectors. Using the high-spatial-frequency imaging capability of an irradiated LiF crystal, 2D information of the coherence degree, beam divergence and beam quality factor M 2 were retrieved from simple diffraction patterns. The developed beam metrology was validated with a laboratory reference laser, and then successfully applied at a beamline facility, in agreement with the source specifications.

Observation of coral reefs on Ishigaki Island, Japan, using Landsat TM images and aerial photographs

DOE Office of Scientific and Technical Information (OSTI.GOV)

Matsunaga, Tsuneo; Kayanne, Hajime

1997-06-01

Ishigaki Island is located at the southwestern end of Japanese Islands and famous for its fringing coral reefs. More than twenty LANDSAT TM images in twelve years and aerial photographs taken on 1977 and 1994 were used to survey two shallow reefs on this island, Shiraho and Kabira. Intensive field surveys were also conducted in 1995. All satellite images of Shiraho were geometrically corrected and overlaid to construct a multi-date satellite data set. The effects of solar elevation and tide on satellite imagery were studied with this data set. The comparison of aerial and satellite images indicated that significant changesmore » occurred between 1977 and 1984 in Kabira: rapid formation in the western part and decrease in the eastern part of dark patches. The field surveys revealed that newly formed dark patches in the west contain young corals. These results suggest that remote sensing is useful for not only mapping but also monitoring of shallow coral reefs.« less

Grab a coffee: your aerial images are already analyzed

NASA Astrophysics Data System (ADS)

Garetto, Anthony; Rademacher, Thomas; Schulz, Kristian

2015-07-01

For over 2 decades the AIMTM platform has been utilized in mask shops as the standard for actinic review of photomask sites in order to perform defect disposition and repair review. Throughout this time the measurement throughput of the systems has been improved in order to keep pace with the requirements demanded by a manufacturing environment, however the analysis of the sites captured has seen little improvement and remained a manual process. This manual analysis of aerial images is time consuming, subject to error and unreliability and contributes to holding up turn-around time (TAT) and slowing process flow in a manufacturing environment. AutoAnalysis, the first application available for the FAVOR® platform, offers a solution to these problems by providing fully automated data transfer and analysis of AIMTM aerial images. The data is automatically output in a customizable format that can be tailored to your internal needs and the requests of your customers. Savings in terms of operator time arise from the automated analysis which no longer needs to be performed. Reliability is improved as human error is eliminated making sure the most defective region is always and consistently captured. Finally the TAT is shortened and process flow for the back end of the line improved as the analysis is fast and runs in parallel to the measurements. In this paper the concept and approach of AutoAnalysis will be presented as well as an update to the status of the project. A look at the benefits arising from the automation and the customizable approach of the solution will be shown.

Metrological AFMs and its application for versatile nano-dimensional metrology tasks

NASA Astrophysics Data System (ADS)

Dai, Gaoliang; Dziomba, T.; Pohlenz, F.; Danzebrink, H.-U.; Koenders, L.

2010-08-01

Traceable calibrations of various micro and nano measurement devices are crucial tasks for ensuring reliable measurements for micro and nanotechnology. Today metrological AFM are widely used for traceable calibrations of nano dimensional standards. In this paper, we introduced the developments of metrological force microscopes at PTB. Of the three metrological AFMs described here, one is capable of measuring in a volume of 25 mm x 25 mm x 5 mm. All instruments feature interferometers and the three-dimensional position measurements are thus directly traceable to the metre definition. Some calibration examples on, for instance, flatness standards, step height standards, one and two dimensional gratings are demonstrated.

CD-SEM metrology and OPC modeling for 2D patterning in advanced technology nodes (Conference Presentation)

NASA Astrophysics Data System (ADS)

Wallow, Thomas I.; Zhang, Chen; Fumar-Pici, Anita; Chen, Jun; Laenens, Bart; Spence, Christopher A.; Rio, David; van Adrichem, Paul; Dillen, Harm; Wang, Jing; Yang, Peng-Cheng; Gillijns, Werner; Jaenen, Patrick; van Roey, Frieda; van de Kerkhove, Jeroen; Babin, Sergey

2017-03-01

In the course of assessing OPC compact modeling capabilities and future requirements, we chose to investigate the interface between CD-SEM metrology methods and OPC modeling in some detail. Two linked observations motivated our study: 1) OPC modeling is, in principle, agnostic of metrology methods and best practice implementation. 2) Metrology teams across the industry use a wide variety of equipment, hardware settings, and image/data analysis methods to generate the large volumes of CD-SEM measurement data that are required for OPC in advanced technology nodes. Initial analyses led to the conclusion that many independent best practice metrology choices based on systematic study as well as accumulated institutional knowledge and experience can be reasonably made. Furthermore, these choices can result in substantial variations in measurement of otherwise identical model calibration and verification patterns. We will describe several experimental 2D test cases (i.e., metal, via/cut layers) that examine how systematic changes in metrology practice impact both the metrology data itself and the resulting full chip compact model behavior. Assessment of specific methodology choices will include: • CD-SEM hardware configurations and settings: these may range from SEM beam conditions (voltage, current, etc.,) to magnification, to frame integration optimizations that balance signal-to-noise vs. resist damage. • Image and measurement optimization: these may include choice of smoothing filters for noise suppression, threshold settings, etc. • Pattern measurement methodologies: these may include sampling strategies, CD- and contour- based approaches, and various strategies to optimize the measurement of complex 2D shapes. In addition, we will present conceptual frameworks and experimental methods that allow practitioners of OPC metrology to assess impacts of metrology best practice choices on model behavior. Finally, we will also assess requirements posed by node scaling

Feature-based registration of historical aerial images by Area Minimization

NASA Astrophysics Data System (ADS)

Nagarajan, Sudhagar; Schenk, Toni

2016-06-01

The registration of historical images plays a significant role in assessing changes in land topography over time. By comparing historical aerial images with recent data, geometric changes that have taken place over the years can be quantified. However, the lack of ground control information and precise camera parameters has limited scientists' ability to reliably incorporate historical images into change detection studies. Other limitations include the methods of determining identical points between recent and historical images, which has proven to be a cumbersome task due to continuous land cover changes. Our research demonstrates a method of registering historical images using Time Invariant Line (TIL) features. TIL features are different representations of the same line features in multi-temporal data without explicit point-to-point or straight line-to-straight line correspondence. We successfully determined the exterior orientation of historical images by minimizing the area formed between corresponding TIL features in recent and historical images. We then tested the feasibility of the approach with synthetic and real data and analyzed the results. Based on our analysis, this method shows promise for long-term 3D change detection studies.

EDITORIAL: Nanoscale metrology Nanoscale metrology

NASA Astrophysics Data System (ADS)

Klapetek, P.; Koenders, L.

2011-09-01

This special issue of Measurement Science and Technology presents selected contributions from the NanoScale 2010 seminar held in Brno, Czech Republic. It was the 5th Seminar on Nanoscale Calibration Standards and Methods and the 9th Seminar on Quantitative Microscopy (the first being held in 1995). The seminar was jointly organized with the Czech Metrology Institute (CMI) and the Nanometrology Group of the Technical Committee-Length of EURAMET. There were two workshops that were integrated into NanoScale 2010: first a workshop presenting the results obtained in NANOTRACE, a European Metrology Research Project (EMRP) on displacement-measuring optical interferometers, and second a workshop about the European metrology landscape in nanometrology related to thin films, scanning probe microscopy and critical dimension. The aim of this workshop was to bring together developers, applicants and metrologists working in this field of nanometrology and to discuss future needs. For more information see www.co-nanomet.eu. The articles in this special issue of Measurement Science and Technology cover some novel scientific results. This issue can serve also as a representative selection of topics that are currently being investigated in the field of European and world-wide nanometrology. Besides traditional topics of dimensional metrology, like development of novel interferometers or laser stabilization techniques, some novel interesting trends in the field of nanometrology are observed. As metrology generally reflects the needs of scientific and industrial research, many research topics addressed refer to current trends in nanotechnology, too, focusing on traceability and improved measurement accuracy in this field. While historically the most studied standards in nanometrology were related to simple geometric structures like step heights or 1D or 2D gratings, now we are facing tasks to measure 3D structures and many unforeseen questions arising from interesting physical

Coherent double-color interference microscope for traceable optical surface metrology

NASA Astrophysics Data System (ADS)

Malinovski, I.; França, R. S.; Bessa, M. S.; Silva, C. R.; Couceiro, I. B.

2016-06-01

Interference microscopy is an important field of dimensional surface metrology because it provides direct traceability of the measurements to the SI base unit definition of the metre. With a typical measurement range from micrometres to nanometres interference microscopy (IM) covers the gap between classic metrology and nanometrology, providing continuous transfer of dimensional metrology into new areas of nanoscience and nanotechnology. Therefore IM is considered to be an indispensable tool for traceable transfer of the metre unit to different instruments. We report here the metrological study of an absolute Linnik interference microscope (IM) based on two frequency stabilized lasers. The design permits the flexible use of both lasers for measurements depending on the demand of the concrete measurement task. By principle of operation IM is combination of imaging and phase-shifting interferometry (PSI). The traceability is provided by the wavelength reference, that is, a He-Ne 633 nm stabilized laser. The second laser source, that is, a Blue-Green 488 nm grating stabilized laser diode, is used for improvements of resolution, and also for resolving integer fringe discontinuities on sharp features of the surface. The IM was optimized for surface height metrology. We have performed the study of the systematic effects of the measurements. This study allowed us to improve the hardware and software of IM and to find corrections for main systematic errors. The IM is purposed for 1D to 3D height metrology and surface topography in an extended range from nanometres to micrometres. The advantages and disadvantages of the design and developed methods are discussed.

High-intensity therapeutic ultrasound: metrological requirements versus clinical usage

NASA Astrophysics Data System (ADS)

Aubry, J.-F.

2012-10-01

High-intensity therapeutic ultrasound (HITU) is an appealing non-invasive, non-ionizing therapeutic modality with a wide range of tissue interactions ranging from transient permeabilization of cell membranes to thermal ablation. The ability to guide and monitor the treatment with an associated ultrasonic or magnetic resonance imaging device has resulted in a dramatic rise in the clinical use of therapeutic ultrasound in the past two decades. Nevertheless, the range of clinical applications and the number of patients treated has grown at a much higher pace than the definition of standards. In this paper the metrological requirements of the therapeutic beams are reviewed and are compared with the current clinical use of image-guided HITU mostly based on a practical approach. Liver therapy, a particularly challenging clinical application, is discussed to highlight the differences between some complex clinical situations and the experimental conditions of the metrological characterization of ultrasonic transducers.

Application of high resolution images from unmanned aerial vehicles for hydrology and range science

USDA-ARS?s Scientific Manuscript database

A common problem in many natural resource disciplines is the lack of high-enough spatial resolution images that can be used for monitoring and modeling purposes. Advances have been made in the utilization of Unmanned Aerial Vehicles (UAVs) in hydrology and rangeland science. By utilizing low fligh...

Aerial Images from AN Uav System: 3d Modeling and Tree Species Classification in a Park Area

NASA Astrophysics Data System (ADS)

Gini, R.; Passoni, D.; Pinto, L.; Sona, G.

2012-07-01

The use of aerial imagery acquired by Unmanned Aerial Vehicles (UAVs) is scheduled within the FoGLIE project (Fruition of Goods Landscape in Interactive Environment): it starts from the need to enhance the natural, artistic and cultural heritage, to produce a better usability of it by employing audiovisual movable systems of 3D reconstruction and to improve monitoring procedures, by using new media for integrating the fruition phase with the preservation ones. The pilot project focus on a test area, Parco Adda Nord, which encloses various goods' types (small buildings, agricultural fields and different tree species and bushes). Multispectral high resolution images were taken by two digital compact cameras: a Pentax Optio A40 for RGB photos and a Sigma DP1 modified to acquire the NIR band. Then, some tests were performed in order to analyze the UAV images' quality with both photogrammetric and photo-interpretation purposes, to validate the vector-sensor system, the image block geometry and to study the feasibility of tree species classification. Many pre-signalized Control Points were surveyed through GPS to allow accuracy analysis. Aerial Triangulations (ATs) were carried out with photogrammetric commercial software, Leica Photogrammetry Suite (LPS) and PhotoModeler, with manual or automatic selection of Tie Points, to pick out pros and cons of each package in managing non conventional aerial imagery as well as the differences in the modeling approach. Further analysis were done on the differences between the EO parameters and the corresponding data coming from the on board UAV navigation system.

Improving automated 3D reconstruction methods via vision metrology

NASA Astrophysics Data System (ADS)

Toschi, Isabella; Nocerino, Erica; Hess, Mona; Menna, Fabio; Sargeant, Ben; MacDonald, Lindsay; Remondino, Fabio; Robson, Stuart

2015-05-01

This paper aims to provide a procedure for improving automated 3D reconstruction methods via vision metrology. The 3D reconstruction problem is generally addressed using two different approaches. On the one hand, vision metrology (VM) systems try to accurately derive 3D coordinates of few sparse object points for industrial measurement and inspection applications; on the other, recent dense image matching (DIM) algorithms are designed to produce dense point clouds for surface representations and analyses. This paper strives to demonstrate a step towards narrowing the gap between traditional VM and DIM approaches. Efforts are therefore intended to (i) test the metric performance of the automated photogrammetric 3D reconstruction procedure, (ii) enhance the accuracy of the final results and (iii) obtain statistical indicators of the quality achieved in the orientation step. VM tools are exploited to integrate their main functionalities (centroid measurement, photogrammetric network adjustment, precision assessment, etc.) into the pipeline of 3D dense reconstruction. Finally, geometric analyses and accuracy evaluations are performed on the raw output of the matching (i.e. the point clouds) by adopting a metrological approach. The latter is based on the use of known geometric shapes and quality parameters derived from VDI/VDE guidelines. Tests are carried out by imaging the calibrated Portable Metric Test Object, designed and built at University College London (UCL), UK. It allows assessment of the performance of the image orientation and matching procedures within a typical industrial scenario, characterised by poor texture and known 3D/2D shapes.

Aerial Video Imaging

NASA Technical Reports Server (NTRS)

1991-01-01

When Michael Henry wanted to start an aerial video service, he turned to Johnson Space Center for assistance. Two NASA engineers - one had designed and developed TV systems in Apollo, Skylab, Apollo- Soyuz and Space Shuttle programs - designed a wing-mounted fiberglass camera pod. Camera head and angles are adjustable, and the pod is shaped to reduce vibration. The controls are located so a solo pilot can operate the system. A microprocessor displays latitude, longitude, and bearing, and a GPS receiver provides position data for possible legal references. The service has been successfully utilized by railroads, oil companies, real estate companies, etc.

Detection of Laurel Wilt Disease in Avocado Using Low Altitude Aerial Imaging

PubMed Central

de Castro, Ana I.; Ehsani, Reza; Ploetz, Randy C.; Crane, Jonathan H.; Buchanon, Sherrie

2015-01-01

Laurel wilt is a lethal disease of plants in the Lauraceae plant family, including avocado (Persea americana). This devastating disease has spread rapidly along the southeastern seaboard of the United States and has begun to affect commercial avocado production in Florida. The main objective of this study was to evaluate the potential to discriminate laurel wilt-affected avocado trees using aerial images taken with a modified camera during helicopter surveys at low-altitude in the commercial avocado production area. The ability to distinguish laurel wilt-affected trees from other factors that produce similar external symptoms was also studied. RmodGB digital values of healthy trees and laurel wilt-affected trees, as well as fruit stress and vines covering trees were used to calculate several vegetation indices (VIs), band ratios, and VI combinations. These indices were subjected to analysis of variance (ANOVA) and an M-statistic was performed in order to quantify the separability of those classes. Significant differences in spectral values among laurel wilt affected and healthy trees were observed in all vegetation indices calculated, although the best results were achieved with Excess Red (ExR), (Red–Green) and Combination 1 (COMB1) in all locations. B/G showed a very good potential for separate the other factors with symptoms similar to laurel wilt-affected trees, such as fruit stress and vines covering trees, from laurel wilt-affected trees. These consistent results prove the usefulness of using a modified camera (RmodGB) to discriminate laurel wilt-affected avocado trees from healthy trees, as well as from other factors that cause the same symptoms and suggest performing the classification in further research. According to our results, ExR and B/G should be utilized to develop an algorithm or decision rules to classify aerial images, since they showed the highest capacity to discriminate laurel wilt-affected trees. This methodology may allow the rapid

Detection of laurel wilt disease in avocado using low altitude aerial imaging.

PubMed

de Castro, Ana I; Ehsani, Reza; Ploetz, Randy C; Crane, Jonathan H; Buchanon, Sherrie

2015-01-01

Laurel wilt is a lethal disease of plants in the Lauraceae plant family, including avocado (Persea americana). This devastating disease has spread rapidly along the southeastern seaboard of the United States and has begun to affect commercial avocado production in Florida. The main objective of this study was to evaluate the potential to discriminate laurel wilt-affected avocado trees using aerial images taken with a modified camera during helicopter surveys at low-altitude in the commercial avocado production area. The ability to distinguish laurel wilt-affected trees from other factors that produce similar external symptoms was also studied. RmodGB digital values of healthy trees and laurel wilt-affected trees, as well as fruit stress and vines covering trees were used to calculate several vegetation indices (VIs), band ratios, and VI combinations. These indices were subjected to analysis of variance (ANOVA) and an M-statistic was performed in order to quantify the separability of those classes. Significant differences in spectral values among laurel wilt affected and healthy trees were observed in all vegetation indices calculated, although the best results were achieved with Excess Red (ExR), (Red-Green) and Combination 1 (COMB1) in all locations. B/G showed a very good potential for separate the other factors with symptoms similar to laurel wilt-affected trees, such as fruit stress and vines covering trees, from laurel wilt-affected trees. These consistent results prove the usefulness of using a modified camera (RmodGB) to discriminate laurel wilt-affected avocado trees from healthy trees, as well as from other factors that cause the same symptoms and suggest performing the classification in further research. According to our results, ExR and B/G should be utilized to develop an algorithm or decision rules to classify aerial images, since they showed the highest capacity to discriminate laurel wilt-affected trees. This methodology may allow the rapid detection

Suitability of low cost commercial off-the-shelf aerial platforms and consumer grade digital cameras for small format aerial photography

NASA Astrophysics Data System (ADS)

Turley, Anthony Allen

Many research projects require the use of aerial images. Wetlands evaluation, crop monitoring, wildfire management, environmental change detection, and forest inventory are but a few of the applications of aerial imagery. Low altitude Small Format Aerial Photography (SFAP) is a bridge between satellite and man-carrying aircraft image acquisition and ground-based photography. The author's project evaluates digital images acquired using low cost commercial digital cameras and standard model airplanes to determine their suitability for remote sensing applications. Images from two different sites were obtained. Several photo missions were flown over each site, acquiring images in the visible and near infrared electromagnetic bands. Images were sorted and analyzed to select those with the least distortion, and blended together with Microsoft Image Composite Editor. By selecting images taken within minutes apart, radiometric qualities of the images were virtually identical, yielding no blend lines in the composites. A commercial image stitching program, Autopano Pro, was purchased during the later stages of this study. Autopano Pro was often able to mosaic photos that the free Image Composite Editor was unable to combine. Using telemetry data from an onboard data logger, images were evaluated to calculate scale and spatial resolution. ERDAS ER Mapper and ESRI ArcGIS were used to rectify composite images. Despite the limitations inherent in consumer grade equipment, images of high spatial resolution were obtained. Mosaics of as many as 38 images were created, and the author was able to record detailed aerial images of forest and wetland areas where foot travel was impractical or impossible.

A Roadmap for Thermal Metrology

NASA Astrophysics Data System (ADS)

Bojkovski, J.; Fischer, J.; Machin, G.; Pavese, F.; Peruzzi, A.; Renaot, E.; Tegeler, E.

2009-02-01

A provisional roadmap for thermal metrology was developed in Spring 2006 as part of the EUROMET iMERA activity toward increasing impact from national investment in European metrology R&D. This consisted of two parts: one addressing the influence of thermal metrology on society, industry, and science, and the other specifying the requirements of enabling thermal metrology to serve future needs. The roadmap represents the shared vision of the EUROMET TC Therm committee as to how thermal metrology should develop to meet future requirements over the next 15 years. It is important to stress that these documents are a first attempt to roadmap the whole of thermal metrology and will certainly need regular review and revision to remain relevant and useful to the community they seek to serve. The first part of the roadmap, “Thermal metrology for society, industry, and science,” identifies the main social and economic triggers driving developments in thermal metrology—notably citizen safety and security, new production technologies, environment and global climate change, energy, and health. Stemming from these triggers, key targets are identified that require improved thermal measurements. The second part of the roadmap, “Enabling thermal metrology to serve future needs” identifies another set of triggers, like global trade and interoperability, future needs in transport, and the earth radiation budget. Stemming from these triggers, key targets are identified, such as improved realizations and dissemination of the SI unit the kelvin, anchoring the kelvin to the Boltzmann constant, k B, and calculating thermal properties from first principles. To facilitate these outcomes, the roadmap identifies the technical advances required in thermal measurement standards.

Metrological Support in Technosphere Safety

NASA Astrophysics Data System (ADS)

Akhobadze, G. N.

2017-11-01

The principle of metrological support in technosphere safety is considered. It is based on the practical metrology. The theoretical aspects of accuracy and errors of the measuring instruments intended for diagnostics and control of the technosphere under the influence of factors harmful to human beings are presented. The necessity to choose measuring devices with high metrological characteristics according to the accuracy class and contact of sensitive elements with a medium under control is shown. The types of additional errors in measuring instruments that arise when they are affected by environmental influences are described. A specific example of the analyzers application to control industrial emissions and measure the oil and particulate matter in wastewater is shown; it allows assessing advantages and disadvantages of analyzers. Besides, the recommendations regarding the missing metrological characteristics of the instruments in use are provided. The technosphere continuous monitoring taking into account the metrological principles is expected to efficiently forecast the technosphere development and make appropriate decisions.

Image degradation in aerial imagery duplicates. [photographic processing of photographic film and reproduction (copying)

NASA Technical Reports Server (NTRS)

Lockwood, H. E.

1975-01-01

A series of Earth Resources Aircraft Program data flights were made over an aerial test range in Arizona for the evaluation of large cameras. Specifically, both medium altitude and high altitude flights were made to test and evaluate a series of color as well as black-and-white films. Image degradation, inherent in duplication processing, was studied. Resolution losses resulting from resolution characteristics of the film types are given. Color duplicates, in general, are shown to be degraded more than black-and-white films because of the limitations imposed by available aerial color duplicating stock. Results indicate that a greater resolution loss may be expected when the original has higher resolution. Photographs of the duplications are shown.

Algorithm for automatic image dodging of unmanned aerial vehicle images using two-dimensional radiometric spatial attributes

NASA Astrophysics Data System (ADS)

Li, Wenzhuo; Sun, Kaimin; Li, Deren; Bai, Ting

2016-07-01

Unmanned aerial vehicle (UAV) remote sensing technology has come into wide use in recent years. The poor stability of the UAV platform, however, produces more inconsistencies in hue and illumination among UAV images than other more stable platforms. Image dodging is a process used to reduce these inconsistencies caused by different imaging conditions. We propose an algorithm for automatic image dodging of UAV images using two-dimensional radiometric spatial attributes. We use object-level image smoothing to smooth foreground objects in images and acquire an overall reference background image by relative radiometric correction. We apply the Contourlet transform to separate high- and low-frequency sections for every single image, and replace the low-frequency section with the low-frequency section extracted from the corresponding region in the overall reference background image. We apply the inverse Contourlet transform to reconstruct the final dodged images. In this process, a single image must be split into reasonable block sizes with overlaps due to large pixel size. Experimental mosaic results show that our proposed method reduces the uneven distribution of hue and illumination. Moreover, it effectively eliminates dark-bright interstrip effects caused by shadows and vignetting in UAV images while maximally protecting image texture information.

Remote Sensing Soil Moisture Analysis by Unmanned Aerial Vehicles Digital Imaging

NASA Astrophysics Data System (ADS)

Yeh, C. Y.; Lin, H. R.; Chen, Y. L.; Huang, S. Y.; Wen, J. C.

2017-12-01

In recent years, remote sensing analysis has been able to apply to the research of climate change, environment monitoring, geology, hydro-meteorological, and so on. However, the traditional methods for analyzing wide ranges of surface soil moisture of spatial distribution surveys may require plenty resources besides the high cost. In the past, remote sensing analysis performed soil moisture estimates through shortwave, thermal infrared ray, or infrared satellite, which requires lots of resources, labor, and money. Therefore, the digital image color was used to establish the multiple linear regression model. Finally, we can find out the relationship between surface soil color and soil moisture. In this study, we use the Unmanned Aerial Vehicle (UAV) to take an aerial photo of the fallow farmland. Simultaneously, we take the surface soil sample from 0-5 cm of the surface. The soil will be baking by 110° C and 24 hr. And the software ImageJ 1.48 is applied for the analysis of the digital images and the hue analysis into Red, Green, and Blue (R, G, B) hue values. The correlation analysis is the result from the data obtained from the image hue and the surface soil moisture at each sampling point. After image and soil moisture analysis, we use the R, G, B and soil moisture to establish the multiple regression to estimate the spatial distributions of surface soil moisture. In the result, we compare the real soil moisture and the estimated soil moisture. The coefficient of determination (R2) can achieve 0.5-0.7. The uncertainties in the field test, such as the sun illumination, the sun exposure angle, even the shadow, will affect the result; therefore, R2 can achieve 0.5-0.7 reflects good effect for the in-suit test by using the digital image to estimate the soil moisture. Based on the outcomes of the research, using digital images from UAV to estimate the surface soil moisture is acceptable. However, further investigations need to be collected more than ten days (four

Small unmanned aerial vehicles (micro-UAVs, drones) in plant ecology.

PubMed

Cruzan, Mitchell B; Weinstein, Ben G; Grasty, Monica R; Kohrn, Brendan F; Hendrickson, Elizabeth C; Arredondo, Tina M; Thompson, Pamela G

2016-09-01

Low-elevation surveys with small aerial drones (micro-unmanned aerial vehicles [UAVs]) may be used for a wide variety of applications in plant ecology, including mapping vegetation over small- to medium-sized regions. We provide an overview of methods and procedures for conducting surveys and illustrate some of these applications. Aerial images were obtained by flying a small drone along transects over the area of interest. Images were used to create a composite image (orthomosaic) and a digital surface model (DSM). Vegetation classification was conducted manually and using an automated routine. Coverage of an individual species was estimated from aerial images. We created a vegetation map for the entire region from the orthomosaic and DSM, and mapped the density of one species. Comparison of our manual and automated habitat classification confirmed that our mapping methods were accurate. A species with high contrast to the background matrix allowed adequate estimate of its coverage. The example surveys demonstrate that small aerial drones are capable of gathering large amounts of information on the distribution of vegetation and individual species with minimal impact to sensitive habitats. Low-elevation aerial surveys have potential for a wide range of applications in plant ecology.

PREFACE: VII Brazilian Congress on Metrology (Metrologia 2013)

NASA Astrophysics Data System (ADS)

Costa-Félix, Rodrigo; Bernardes, Americo; Valente de Oliveira, José Carlos; Mauro Granjeiro, José; Epsztejn, Ruth; Ihlenfeld, Waldemar; Smarçaro da Cunha, Valnei

2015-01-01

SEVENTH BRAZILIAN CONGRESS ON METROLOGY (METROLOGIA 2013) Metrology and Quality for a Sustainable Development From November 24th to 27th 2013 was issued the Seventh Brazilian Congress on Metrology (Metrologia 2013), which is a biannual conference organized and sponsored by the Brazilian Society of Metrology (SBM) and the Brazilian National Institute of Metrology, Quality and Technology (Inmetro). This edition was held in the charming and historical city of Ouro Preto, MG, Brazil, and aimed to join people and institutions devoted to the dissemination of the metrology and conformity assessment. The Metrologia 2013 Conference consisted of Keynote Speeches (7) and regular papers (204). Among the regular papers, the 47 most outstanding ones, comprising a high quality content on Metrology and Conformity Assessment, were selected to be published in this issue of the Journal of Physics: Conference Series. The topics of the conference covered all important areas of Metrology, which were agglutinated in the following sessions in the present issue: . Physical Metrology (Acoustics, Vibration and Ultrasound; Electricity and Magnetism; Mechanics; Optics); . Metrology on Ionizing Radiations; . Time and Frequency; . Chemistry Metrology; . Materials Metrology; . Biotechnology; . Uncertainty, Statistics and Mathematics; . Legal Metrology; . Conformity Assessment. It is our great pleasure to present this volume of IOP Journal of Physics: Conference Series (JPCS) to the scientific community to promote further research in Metrology and related areas. We believe that this volume will be both an excellent source of scientific material in the fast evolving fields that were covered by Metrologia 2013. President of the congress Americo Bernardes Federal University of Ouro Preto atb@iceb.ufop.br Editor-in-chief Rodrigo Costa-Félix Brazilian National Institute of Metrology, Quality and Technology rpfelix@inmetro.gov.br Editors José Carlos Valente de Oliveira (Editor on Mechanical Metrology

Image grating metrology using phase-stepping interferometry in scanning beam interference lithography

NASA Astrophysics Data System (ADS)

Li, Minkang; Zhou, Changhe; Wei, Chunlong; Jia, Wei; Lu, Yancong; Xiang, Changcheng; Xiang, XianSong

2016-10-01

Large-sized gratings are essential optical elements in laser fusion and space astronomy facilities. Scanning beam interference lithography is an effective method to fabricate large-sized gratings. To minimize the nonlinear phase written into the photo-resist, the image grating must be measured to adjust the left and right beams to interfere at their waists. In this paper, we propose a new method to conduct wavefront metrology based on phase-stepping interferometry. Firstly, a transmission grating is used to combine the two beams to form an interferogram which is recorded by a charge coupled device(CCD). Phase steps are introduced by moving the grating with a linear stage monitored by a laser interferometer. A series of interferograms are recorded as the displacement is measured by the laser interferometer. Secondly, to eliminate the tilt and piston error during the phase stepping, the iterative least square phase shift method is implemented to obtain the wrapped phase. Thirdly, we use the discrete cosine transform least square method to unwrap the phase map. Experiment results indicate that the measured wavefront has a nonlinear phase around 0.05 λ@404.7nm. Finally, as the image grating is acquired, we simulate the print-error written into the photo-resist.

MSFC Optical Metrology: A National Resource

NASA Technical Reports Server (NTRS)

Burdine, Robert

1998-01-01

A national need exists for Large Diameter Optical Metrology Services. These services include the manufacture, testing, and assurance of precision and control necessary to assure the success of large optical projects. "Best Practices" are often relied on for manufacture and quality controls while optical projects are increasingly more demanding and complex. Marshall Space Flight Center (MSFC) has acquired unique optical measurement, testing and metrology capabilities through active participation in a wide variety of NASA optical programs. An overview of existing optical facilities and metrology capabilities is given with emphasis on use by other optical projects. Cost avoidance and project success is stressed through use of existing MSFC facilities and capabilities for measurement and metrology controls. Current issues in large diameter optical metrology are briefly reviewed. The need for a consistent and long duration Large Diameter Optical Metrology Service Group is presented with emphasis on the establishment of a National Large Diameter Optical Standards Laboratory. Proposals are made to develop MSFC optical standards and metrology capabilities as the primary national standards resource, providing access to MSFC Optical Core Competencies for manufacturers and researchers. Plans are presented for the development of a national lending library of precision optical standards with emphasis on cost avoidance while improving measurement assurance.

Building Change Detection from Bi-Temporal Dense-Matching Point Clouds and Aerial Images.

PubMed

Pang, Shiyan; Hu, Xiangyun; Cai, Zhongliang; Gong, Jinqi; Zhang, Mi

2018-03-24

In this work, a novel building change detection method from bi-temporal dense-matching point clouds and aerial images is proposed to address two major problems, namely, the robust acquisition of the changed objects above ground and the automatic classification of changed objects into buildings or non-buildings. For the acquisition of changed objects above ground, the change detection problem is converted into a binary classification, in which the changed area above ground is regarded as the foreground and the other area as the background. For the gridded points of each period, the graph cuts algorithm is adopted to classify the points into foreground and background, followed by the region-growing algorithm to form candidate changed building objects. A novel structural feature that was extracted from aerial images is constructed to classify the candidate changed building objects into buildings and non-buildings. The changed building objects are further classified as "newly built", "taller", "demolished", and "lower" by combining the classification and the digital surface models of two periods. Finally, three typical areas from a large dataset are used to validate the proposed method. Numerous experiments demonstrate the effectiveness of the proposed algorithm.

Improving Metrological Reliability of Information-Measuring Systems Using Mathematical Modeling of Their Metrological Characteristics

NASA Astrophysics Data System (ADS)

Kurnosov, R. Yu; Chernyshova, T. I.; Chernyshov, V. N.

2018-05-01

The algorithms for improving the metrological reliability of analogue blocks of measuring channels and information-measuring systems are developed. The proposed algorithms ensure the optimum values of their metrological reliability indices for a given analogue circuit block solution.

Three dimensional monitoring of urban development by means of ortho-rectified aerial photographs and high-resolution satellite images.

PubMed

Ayhan, E; Erden, O; Gormus, E T

2008-12-01

Nowadays, cities are developing and changing rapidly due to the increases in the population and immigration. Rapid changing brings obligation to control the cities by planning. The satellite images and the aerial photographs enable us to track the urban development and provide the opportunity to get the current data about urban. With the help of these images, cities may have interrogated dynamic structures. This study is composed of three steps. In the first step, orthophoto images have been generated in order to track urban developments by using the aerial photographs and the satellite images. In this step, the panchromatic (PAN), the multi spectral (MS) and the pan-sharpened image of IKONOS satellite have been used as input satellite data and the accuracy of orthophoto images has been investigated in detail, in terms of digital elevation model (DEM), control points, input images and their properties. In the second step, a 3D city model with database has been generated with the help of orthophoto images and the vector layouts. And in the last step, up to date urban information obtained from 3D city model. This study shows that it is possible to detect the unlicensed buildings and the areas which are going to be nationalized and it also shows that it is easy to document the existing alterations in the cities with the help of current development plans and orthophoto images. And since accessing updated data is very essential to control development and monitor the temporal alterations in urban areas, in this study it is proven that the orthophoto images generated by using aerial photos and satellite images are very reliable to use in obtaining topographical information, in change detection and in city planning. When digital orthophoto images used with GIS, they provide quick decision control mechanisms and quick data collection. Besides, they help to find efficient solutions in a short time in the planning applications.

64nm pitch metal1 double patterning metrology: CD and OVL control by SEMCD, image based overlay and diffraction based overlay

NASA Astrophysics Data System (ADS)

Ducoté, Julien; Dettoni, Florent; Bouyssou, Régis; Le-Gratiet, Bertrand; Carau, Damien; Dezauzier, Christophe

2015-03-01

Patterning process control of advanced nodes has required major changes over the last few years. Process control needs of critical patterning levels since 28nm technology node is extremely aggressive showing that metrology accuracy/sensitivity must be finely tuned. The introduction of pitch splitting (Litho-Etch-Litho-Etch) at 14FDSOInm node requires the development of specific metrologies to adopt advanced process control (for CD, overlay and focus corrections). The pitch splitting process leads to final line CD uniformities that are a combination of the CD uniformities of the two exposures, while the space CD uniformities are depending on both CD and OVL variability. In this paper, investigations of CD and OVL process control of 64nm minimum pitch at Metal1 level of 14FDSOI technology, within the double patterning process flow (Litho, hard mask etch, line etch) are presented. Various measurements with SEMCD tools (Hitachi), and overlay tools (KT for Image Based Overlay - IBO, and ASML for Diffraction Based Overlay - DBO) are compared. Metrology targets are embedded within a block instanced several times within the field to perform intra-field process variations characterizations. Specific SEMCD targets were designed for independent measurement of both line CD (A and B) and space CD (A to B and B to A) for each exposure within a single measurement during the DP flow. Based on those measurements correlation between overlay determined with SEMCD and with standard overlay tools can be evaluated. Such correlation at different steps through the DP flow is investigated regarding the metrology type. Process correction models are evaluated with respect to the measurement type and the intra-field sampling.

A case study of comparing radiometrically calibrated reflectance of an image mosaic from unmanned aerial system with that of a single image from manned aircraft over a same area

NASA Astrophysics Data System (ADS)

Shi, Yeyin; Thomasson, J. Alex; Yang, Chenghai; Cope, Dale; Sima, Chao

2017-05-01

Though sharing with many commonalities, one of the major differences between conventional high-altitude airborne remote sensing and low-altitude unmanned aerial system (UAS) based remote sensing is that the latter one has much smaller ground footprint for each image shot. To cover the same area on the ground, it requires the low-altitude UASbased platform to take many highly-overlapped images to produce a good mosaic, instead of just one or a few image shots by the high-altitude aerial platform. Such an UAS flight usually takes 10 to 30 minutes or even longer to complete; environmental lighting change during this time span cannot be ignored especially when spectral variations of various parts of a field are of interests. In this case study, we compared the visible reflectance of two aerial imagery - one generated from mosaicked UAS images, the other generated from a single image taken by a manned aircraft - over the same agricultural field to quantitatively evaluate their spectral variations caused by the different data acquisition strategies. Specifically, we (1) developed our customized ground calibration points (GCPs) and an associated radiometric calibration method for UAS data processing based on camera's sensitivity characteristics; (2) developed a basic comparison method for radiometrically calibrated data from the two aerial platforms based on regions of interests. We see this study as a starting point for a series of following studies to understand the environmental influence on UAS data and investigate the solutions to minimize such influence to ensure data quality.

SEM contour based metrology for microlens process studies in CMOS image sensor technologies

NASA Astrophysics Data System (ADS)

Lakcher, Amine; Ostrovsky, Alain; Le-Gratiet, Bertrand; Berthier, Ludovic; Bidault, Laurent; Ducoté, Julien; Jamin-Mornet, Clémence; Mortini, Etienne; Besacier, Maxime

2018-03-01

From the first digital cameras which appeared during the 70s to cameras of current smartphones, image sensors have undergone significant technological development in the last decades. The development of CMOS image sensor technologies in the 90s has been the main driver of the recent progresses. The main component of an image sensor is the pixel. A pixel contains a photodiode connected to transistors but only the photodiode area is light sensitive. This results in a significant loss of efficiency. To solve this issue, microlenses are used to focus the incident light on the photodiode. A microlens array is made out of a transparent material and has a spherical cap shape. To obtain this spherical shape, a lithography process is performed to generate resist blocks which are then annealed above their glass transition temperature (reflow). Even if the dimensions to consider are higher than in advanced IC nodes, microlenses are sensitive to process variability during lithography and reflow. A good control of the microlens dimensions is key to optimize the process and thus the performance of the final product. The purpose of this paper is to apply SEM contour metrology [1, 2, 3, 4] to microlenses in order to develop a relevant monitoring methodology and to propose new metrics to engineers to evaluate their process or optimize the design of the microlens arrays.

1.5 nm fabrication of test patterns for characterization of metrological systems

DOE PAGES

Babin, Sergey; Calafiore, Giuseppe; Peroz, Christophe; ...

2015-11-06

Any metrology tool is only as good as it is calibrated. The characterization of metrology systems requires test patterns at a scale about ten times smaller than the measured features. The fabrication of patterns with linewidths down to 1.5 nm is described. The test sample was designed in such a way that the distribution of linewidths appears to be random at any location. This pseudorandom test pattern is used to characterize dimensional metrology equipment over its entire dynamic range by extracting the modulation transfer function of the system. The test pattern contains alternating lines of silicon and tungsten silicide, eachmore » according to its designed width. As a result, the fabricated test samples were imaged using a transmission electron microscope, a scanning electron microscope, and an atomic force microscope. (C) 2015 American Vacuum Society.« less

Fuzzy C-Means Algorithm for Segmentation of Aerial Photography Data Obtained Using Unmanned Aerial Vehicle

NASA Astrophysics Data System (ADS)

Akinin, M. V.; Akinina, N. V.; Klochkov, A. Y.; Nikiforov, M. B.; Sokolova, A. V.

2015-05-01

The report reviewed the algorithm fuzzy c-means, performs image segmentation, give an estimate of the quality of his work on the criterion of Xie-Beni, contain the results of experimental studies of the algorithm in the context of solving the problem of drawing up detailed two-dimensional maps with the use of unmanned aerial vehicles. According to the results of the experiment concluded that the possibility of applying the algorithm in problems of decoding images obtained as a result of aerial photography. The considered algorithm can significantly break the original image into a plurality of segments (clusters) in a relatively short period of time, which is achieved by modification of the original k-means algorithm to work in a fuzzy task.

EROS main image file - A picture perfect database for Landsat imagery and aerial photography

NASA Technical Reports Server (NTRS)

Jack, R. F.

1984-01-01

The Earth Resources Observation System (EROS) Program was established by the U.S. Department of the Interior in 1966 under the administration of the Geological Survey. It is primarily concerned with the application of remote sensing techniques for the management of natural resources. The retrieval system employed to search the EROS database is called INORAC (Inquiry, Ordering, and Accounting). A description is given of the types of images identified in EROS, taking into account Landsat imagery, Skylab images, Gemini/Apollo photography, and NASA aerial photography. Attention is given to retrieval commands, geographic coordinate searching, refinement techniques, various online functions, and questions regarding the access to the EROS Main Image File.

Metrology for Information Technology

DTIC Science & Technology

1997-05-01

Technology (IT) MEL/ITL Task Group on Metrology for Information Technology (IT) U.S. DEPARTMENT OF COMMERCE Technology Administration National Institute of...NIST management requested a white paper on metrology for information technology (IT). A task group was formed to develop this white paper with...representatives from the Manufacturing Engineering Laboratory (MEL), the Information Technology Laboratory (ITL), and Technology Services (TS). The task

Very high resolution aerial films

NASA Astrophysics Data System (ADS)

Becker, Rolf

1986-11-01

The use of very high resolution aerial films in aerial photography is evaluated. Commonly used panchromatic, color, and CIR films and their high resolution equivalents are compared. Based on practical experience and systematic investigations, the very high image quality and improved height accuracy that can be achieved using these films are demonstrated. Advantages to be gained from this improvement and operational restrictions encountered when using high resolution film are discussed.

SAQP pitch walk metrology using single target metrology

NASA Astrophysics Data System (ADS)

Fang, Fang; Herrera, Pedro; Kagalwala, Taher; Camp, Janay; Vaid, Alok; Pandev, Stilian; Zach, Franz

2017-03-01

Self-aligned quadruple patterning (SAQP) processes have found widespread acceptance in advanced technology nodes to drive device scaling beyond the resolution limitations of immersion scanners. Of the four spaces generated in this process from one lithography pattern two tend to be equivalent as they are derived from the first spacer deposition. The three independent spaces are commonly labelled as α, β and γ. α, β and γ are controlled by multiple process steps including the initial lithographic patterning process, the two mandrel and spacer etches as well as the two spacer depositions. Scatterometry has been the preferred metrology approach, however is restricted to repetitive arrays. In these arrays independent measurements, in particular of alpha and gamma, are not possible due to degeneracy of the standard array targets. . In this work we present a single target approach which lifts the degeneracies commonly encountered while using product relevant layout geometries. We will first describe the metrology approach which includes the previously described SRM (signal response metrology) combined with reference data derived from CD SEM data. The performance of the methodology is shown in figures 1-3. In these figures the optically determined values for alpha, beta and gamma are compared to the CD SEM reference data. The variations are achieved using controlled process experiments varying Mandrel CD and Spacer deposition thicknesses.

Melon yield prediction using small unmanned aerial vehicles

NASA Astrophysics Data System (ADS)

Zhao, Tiebiao; Wang, Zhongdao; Yang, Qi; Chen, YangQuan

2017-05-01

Thanks to the development of camera technologies, small unmanned aerial systems (sUAS), it is possible to collect aerial images of field with more flexible visit, higher resolution and much lower cost. Furthermore, the performance of objection detection based on deeply trained convolutional neural networks (CNNs) has been improved significantly. In this study, we applied these technologies in the melon production, where high-resolution aerial images were used to count melons in the field and predict the yield. CNN-based object detection framework-Faster R-CNN is applied in the melon classification. Our results showed that sUAS plus CNNs were able to detect melons accurately in the late harvest season.

Moving object detection in top-view aerial videos improved by image stacking

NASA Astrophysics Data System (ADS)

Teutsch, Michael; Krüger, Wolfgang; Beyerer, Jürgen

2017-08-01

Image stacking is a well-known method that is used to improve the quality of images in video data. A set of consecutive images is aligned by applying image registration and warping. In the resulting image stack, each pixel has redundant information about its intensity value. This redundant information can be used to suppress image noise, resharpen blurry images, or even enhance the spatial image resolution as done in super-resolution. Small moving objects in the videos usually get blurred or distorted by image stacking and thus need to be handled explicitly. We use image stacking in an innovative way: image registration is applied to small moving objects only, and image warping blurs the stationary background that surrounds the moving objects. Our video data are coming from a small fixed-wing unmanned aerial vehicle (UAV) that acquires top-view gray-value images of urban scenes. Moving objects are mainly cars but also other vehicles such as motorcycles. The resulting images, after applying our proposed image stacking approach, are used to improve baseline algorithms for vehicle detection and segmentation. We improve precision and recall by up to 0.011, which corresponds to a reduction of the number of false positive and false negative detections by more than 3 per second. Furthermore, we show how our proposed image stacking approach can be implemented efficiently.

Ground-Cover Measurements: Assessing Correlation Among Aerial and Ground-Based Methods

NASA Astrophysics Data System (ADS)

Booth, D. Terrance; Cox, Samuel E.; Meikle, Tim; Zuuring, Hans R.

2008-12-01

Wyoming’s Green Mountain Common Allotment is public land providing livestock forage, wildlife habitat, and unfenced solitude, amid other ecological services. It is also the center of ongoing debate over USDI Bureau of Land Management’s (BLM) adjudication of land uses. Monitoring resource use is a BLM responsibility, but conventional monitoring is inadequate for the vast areas encompassed in this and other public-land units. New monitoring methods are needed that will reduce monitoring costs. An understanding of data-set relationships among old and new methods is also needed. This study compared two conventional methods with two remote sensing methods using images captured from two meters and 100 meters above ground level from a camera stand (a ground, image-based method) and a light airplane (an aerial, image-based method). Image analysis used SamplePoint or VegMeasure software. Aerial methods allowed for increased sampling intensity at low cost relative to the time and travel required by ground methods. Costs to acquire the aerial imagery and measure ground cover on 162 aerial samples representing 9000 ha were less than 3000. The four highest correlations among data sets for bare ground—the ground-cover characteristic yielding the highest correlations (r)—ranged from 0.76 to 0.85 and included ground with ground, ground with aerial, and aerial with aerial data-set associations. We conclude that our aerial surveys are a cost-effective monitoring method, that ground with aerial data-set correlations can be equal to, or greater than those among ground-based data sets, and that bare ground should continue to be investigated and tested for use as a key indicator of rangeland health.

Semantic labeling of high-resolution aerial images using an ensemble of fully convolutional networks

NASA Astrophysics Data System (ADS)

Sun, Xiaofeng; Shen, Shuhan; Lin, Xiangguo; Hu, Zhanyi

2017-10-01

High-resolution remote sensing data classification has been a challenging and promising research topic in the community of remote sensing. In recent years, with the rapid advances of deep learning, remarkable progress has been made in this field, which facilitates a transition from hand-crafted features designing to an automatic end-to-end learning. A deep fully convolutional networks (FCNs) based ensemble learning method is proposed to label the high-resolution aerial images. To fully tap the potentials of FCNs, both the Visual Geometry Group network and a deeper residual network, ResNet, are employed. Furthermore, to enlarge training samples with diversity and gain better generalization, in addition to the commonly used data augmentation methods (e.g., rotation, multiscale, and aspect ratio) in the literature, aerial images from other datasets are also collected for cross-scene learning. Finally, we combine these learned models to form an effective FCN ensemble and refine the results using a fully connected conditional random field graph model. Experiments on the ISPRS 2-D Semantic Labeling Contest dataset show that our proposed end-to-end classification method achieves an overall accuracy of 90.7%, a state-of-the-art in the field.

Archaeological Feature Detection from Archive Aerial Photography with a Sfm-Mvs and Image Enhancement Pipeline

NASA Astrophysics Data System (ADS)

Peppa, M. V.; Mills, J. P.; Fieber, K. D.; Haynes, I.; Turner, S.; Turner, A.; Douglas, M.; Bryan, P. G.

2018-05-01

Understanding and protecting cultural heritage involves the detection and long-term documentation of archaeological remains alongside the spatio-temporal analysis of their landscape evolution. Archive aerial photography can illuminate traces of ancient features which typically appear with different brightness values from their surrounding environment, but are not always well defined. This research investigates the implementation of the Structure-from-Motion - Multi-View Stereo image matching approach with an image enhancement algorithm to derive three epochs of orthomosaics and digital surface models from visible and near infrared historic aerial photography. The enhancement algorithm uses decorrelation stretching to improve the contrast of the orthomosaics so as archaeological features are better detected. Results include 2D / 3D locations of detected archaeological traces stored into a geodatabase for further archaeological interpretation and correlation with benchmark observations. The study also discusses the merits and difficulties of the process involved. This research is based on a European-wide project, entitled "Cultural Heritage Through Time", and the case study research was carried out as a component of the project in the UK.

Unmanned Aerial Vehicle Systems for Remote Estimation of Flooded Areas Based on Complex Image Processing.

PubMed

Popescu, Dan; Ichim, Loretta; Stoican, Florin

2017-02-23

Floods are natural disasters which cause the most economic damage at the global level. Therefore, flood monitoring and damage estimation are very important for the population, authorities and insurance companies. The paper proposes an original solution, based on a hybrid network and complex image processing, to this problem. As first novelty, a multilevel system, with two components, terrestrial and aerial, was proposed and designed by the authors as support for image acquisition from a delimited region. The terrestrial component contains a Ground Control Station, as a coordinator at distance, which communicates via the internet with more Ground Data Terminals, as a fixed nodes network for data acquisition and communication. The aerial component contains mobile nodes-fixed wing type UAVs. In order to evaluate flood damage, two tasks must be accomplished by the network: area coverage and image processing. The second novelty of the paper consists of texture analysis in a deep neural network, taking into account new criteria for feature selection and patch classification. Color and spatial information extracted from chromatic co-occurrence matrix and mass fractal dimension were used as well. Finally, the experimental results in a real mission demonstrate the validity of the proposed methodologies and the performances of the algorithms.

Unmanned Aerial Vehicle Systems for Remote Estimation of Flooded Areas Based on Complex Image Processing

PubMed Central

Popescu, Dan; Ichim, Loretta; Stoican, Florin

2017-01-01

Floods are natural disasters which cause the most economic damage at the global level. Therefore, flood monitoring and damage estimation are very important for the population, authorities and insurance companies. The paper proposes an original solution, based on a hybrid network and complex image processing, to this problem. As first novelty, a multilevel system, with two components, terrestrial and aerial, was proposed and designed by the authors as support for image acquisition from a delimited region. The terrestrial component contains a Ground Control Station, as a coordinator at distance, which communicates via the internet with more Ground Data Terminals, as a fixed nodes network for data acquisition and communication. The aerial component contains mobile nodes—fixed wing type UAVs. In order to evaluate flood damage, two tasks must be accomplished by the network: area coverage and image processing. The second novelty of the paper consists of texture analysis in a deep neural network, taking into account new criteria for feature selection and patch classification. Color and spatial information extracted from chromatic co-occurrence matrix and mass fractal dimension were used as well. Finally, the experimental results in a real mission demonstrate the validity of the proposed methodologies and the performances of the algorithms. PMID:28241479

Efficient hybrid metrology for focus, CD, and overlay

NASA Astrophysics Data System (ADS)

Tel, W. T.; Segers, B.; Anunciado, R.; Zhang, Y.; Wong, P.; Hasan, T.; Prentice, C.

2017-03-01

In the advent of multiple patterning techniques in semiconductor industry, metrology has progressively become a burden. With multiple patterning techniques such as Litho-Etch-Litho-Etch and Sidewall Assisted Double Patterning, the number of processing step have increased significantly and therefore, so as the amount of metrology steps needed for both control and yield monitoring. The amount of metrology needed is increasing in each and every node as more layers needed multiple patterning steps, and more patterning steps per layer. In addition to this, there is that need for guided defect inspection, which in itself requires substantially denser focus, overlay, and CD metrology as before. Metrology efficiency will therefore be cruicial to the next semiconductor nodes. ASML's emulated wafer concept offers a highly efficient method for hybrid metrology for focus, CD, and overlay. In this concept metrology is combined with scanner's sensor data in order to predict the on-product performance. The principle underlying the method is to isolate and estimate individual root-causes which are then combined to compute the on-product performance. The goal is to use all the information available to avoid ever increasing amounts of metrology.

Small unmanned aerial vehicles (micro-UAVs, drones) in plant ecology1

PubMed Central

Cruzan, Mitchell B.; Weinstein, Ben G.; Grasty, Monica R.; Kohrn, Brendan F.; Hendrickson, Elizabeth C.; Arredondo, Tina M.; Thompson, Pamela G.

2016-01-01

Premise of the study: Low-elevation surveys with small aerial drones (micro–unmanned aerial vehicles [UAVs]) may be used for a wide variety of applications in plant ecology, including mapping vegetation over small- to medium-sized regions. We provide an overview of methods and procedures for conducting surveys and illustrate some of these applications. Methods: Aerial images were obtained by flying a small drone along transects over the area of interest. Images were used to create a composite image (orthomosaic) and a digital surface model (DSM). Vegetation classification was conducted manually and using an automated routine. Coverage of an individual species was estimated from aerial images. Results: We created a vegetation map for the entire region from the orthomosaic and DSM, and mapped the density of one species. Comparison of our manual and automated habitat classification confirmed that our mapping methods were accurate. A species with high contrast to the background matrix allowed adequate estimate of its coverage. Discussion: The example surveys demonstrate that small aerial drones are capable of gathering large amounts of information on the distribution of vegetation and individual species with minimal impact to sensitive habitats. Low-elevation aerial surveys have potential for a wide range of applications in plant ecology. PMID:27672518

Counter Unmanned Aerial Systems Testing: Evaluation of VIS SWIR MWIR and LWIR passive imagers.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Birch, Gabriel Carlisle; Woo, Bryana Lynn

This report contains analysis of unmanned aerial systems as imaged by visible, short-wave infrared, mid-wave infrared, and long-wave infrared passive devices. Testing was conducted at the Nevada National Security Site (NNSS) during the week of August 15, 2016. Target images in all spectral bands are shown and contrast versus background is reported. Calculations are performed to determine estimated pixels-on-target for detection and assessment levels, and the number of pixels needed to cover a hemisphere for detection or assessment at defined distances. Background clutter challenges are qualitatively discussed for different spectral bands, and low contrast scenarios are highlighted for long-wave infraredmore » imagers.« less

Metrology - Beyond the Calibration Lab

NASA Technical Reports Server (NTRS)

Mimbs, Scott M.

2008-01-01

We rely on data from measurements every day; a gas-pump, a speedometer, and a supermarket weight scale are just three examples of measurements we use to make decisions. We generally accept the data from these measurements as "valid." One reason we can accept the data is the "legal metrology" requirements established and regulated by the government in matters of commerce. The measurement data used by NASA, other government agencies, and industry can be critical to decisions which affect everything from economic viability, to mission success, to the security of the nation. Measurement data can even affect life and death decisions. Metrology requirements must adequately provide for risks associated with these decisions. To do this, metrology must be integrated into all aspects of an industry including research, design, testing, and product acceptance. Metrology, the science of measurement, has traditionally focused on the calibration of instruments, and although instrument calibration is vital, it is only a part of the process that assures quality in measurement data. For example, measurements made in research can influence the fundamental premises that establish the design parameters, which then flow down to the manufacturing processes, and eventually impact the final product. Because a breakdown can occur anywhere within this cycle, measurement quality assurance has to be integrated into every part of the life-cycle process starting with the basic research and ending with the final product inspection process. The purpose of this paper is to discuss the role of metrology in the various phases of a product's life-cycle. For simplicity, the cycle will be divided in four broad phases, with discussions centering on metrology within NASA. .

High throughput wafer defect monitor for integrated metrology applications in photolithography

NASA Astrophysics Data System (ADS)

Rao, Nagaraja; Kinney, Patrick; Gupta, Anand

2008-03-01

The traditional approach to semiconductor wafer inspection is based on the use of stand-alone metrology tools, which while highly sensitive, are large, expensive and slow, requiring inspection to be performed off-line and on a lot sampling basis. Due to the long cycle times and sparse sampling, the current wafer inspection approach is not suited to rapid detection of process excursions that affect yield. The semiconductor industry is gradually moving towards deploying integrated metrology tools for real-time "monitoring" of product wafers during the manufacturing process. Integrated metrology aims to provide end-users with rapid feedback of problems during the manufacturing process, and the benefit of increased yield, and reduced rework and scrap. The approach of monitoring 100% of the wafers being processed requires some trade-off in sensitivity compared to traditional standalone metrology tools, but not by much. This paper describes a compact, low-cost wafer defect monitor suitable for integrated metrology applications and capable of detecting submicron defects on semiconductor wafers at an inspection rate of about 10 seconds per wafer (or 360 wafers per hour). The wafer monitor uses a whole wafer imaging approach to detect defects on both un-patterned and patterned wafers. Laboratory tests with a prototype system have demonstrated sensitivity down to 0.3 µm on un-patterned wafers and down to 1 µm on patterned wafers, at inspection rates of 10 seconds per wafer. An ideal application for this technology is preventing photolithography defects such as "hot spots" by implementing a wafer backside monitoring step prior to exposing wafers in the lithography step.

Computational metrology: enabling full-lot high-density fingerprint information without adding wafer metrology budget, and driving improved monitoring and process control

NASA Astrophysics Data System (ADS)

Kim, Hyun-Sok; Hyun, Min-Sung; Ju, Jae-Wuk; Kim, Young-Sik; Lambregts, Cees; van Rhee, Peter; Kim, Johan; McNamara, Elliott; Tel, Wim; Böcker, Paul; Oh, Nang-Lyeom; Lee, Jun-Hyung

2018-03-01

Computational metrology has been proposed as the way forward to resolve the need for increased metrology density, resulting from extending correction capabilities, without adding actual metrology budget. By exploiting TWINSCAN based metrology information, dense overlay fingerprints for every wafer can be computed. This extended metrology dataset enables new use cases, such as monitoring and control based on fingerprints for every wafer of the lot. This paper gives a detailed description, discusses the accuracy of the fingerprints computed, and will show results obtained in a DRAM HVM manufacturing environment. Also an outlook for improvements and extensions will be shared.

A European Roadmap for Thermophysical Properties Metrology

NASA Astrophysics Data System (ADS)

Filtz, J.-R.; Wu, J.; Stacey, C.; Hollandt, J.; Monte, C.; Hay, B.; Hameury, J.; Villamañan, M. A.; Thurzo-Andras, E.; Sarge, S.

2015-03-01

A roadmap for thermophysical properties metrology was developed in spring 2011 by the Thermophysical Properties Working Group in the EURAMET Technical Committee in charge of Thermometry, Humidity and Moisture, and Thermophysical Properties metrology. This roadmapping process is part of the EURAMET (European Association of National Metrology Institutes) activities aiming to increase impact from national investment in European metrology R&D. The roadmap shows a shared vision of how the development of thermophysical properties metrology should be oriented over the next 15 years to meet future social and economic needs. Since thermophysical properties metrology is a very broad and varied field, the authors have limited this roadmap to the following families of properties: thermal transport properties (thermal conductivity, thermal diffusivity, etc.), radiative properties (emissivity, absorbance, reflectance, and transmittance), caloric quantities (specific heat, enthalpy, etc.), thermodynamic properties (PVT and phase equilibria properties), and temperature-dependent quantities (thermal expansion, compressibility, etc.). This roadmap identifies the main societal and economical triggers that drive developments in thermophysical properties metrology. The key topics considered are energy, environment, advanced manufacturing and processing, public safety, security, and health. Key targets that require improved thermophysical properties measurements are identified in order to address these triggers. Ways are also proposed for defining the necessary skills and the main useful means to be implemented. These proposals will have to be revised as needs and technologies evolve in the future.

Virtual overlay metrology for fault detection supported with integrated metrology and machine learning

NASA Astrophysics Data System (ADS)

Lee, Hong-Goo; Schmitt-Weaver, Emil; Kim, Min-Suk; Han, Sang-Jun; Kim, Myoung-Soo; Kwon, Won-Taik; Park, Sung-Ki; Ryan, Kevin; Theeuwes, Thomas; Sun, Kyu-Tae; Lim, Young-Wan; Slotboom, Daan; Kubis, Michael; Staecker, Jens

2015-03-01

While semiconductor manufacturing moves toward the 7nm node for logic and 15nm node for memory, an increased emphasis has been placed on reducing the influence known contributors have toward the on product overlay budget. With a machine learning technique known as function approximation, we use a neural network to gain insight to how known contributors, such as those collected with scanner metrology, influence the on product overlay budget. The result is a sufficiently trained function that can approximate overlay for all wafers exposed with the lithography system. As a real world application, inline metrology can be used to measure overlay for a few wafers while using the trained function to approximate overlay vector maps for the entire lot of wafers. With the approximated overlay vector maps for all wafers coming off the track, a process engineer can redirect wafers or lots with overlay signatures outside the standard population to offline metrology for excursion validation. With this added flexibility, engineers will be given more opportunities to catch wafers that need to be reworked, resulting in improved yield. The quality of the derived corrections from measured overlay metrology feedback can be improved using the approximated overlay to trigger, which wafers should or shouldn't be, measured inline. As a development or integration engineer the approximated overlay can be used to gain insight into lots and wafers used for design of experiments (DOE) troubleshooting. In this paper we will present the results of a case study that follows the machine learning function approximation approach to data analysis, with production overlay measured on an inline metrology system at SK hynix.

Photogrammetric mapping using unmanned aerial vehicle

NASA Astrophysics Data System (ADS)

Graça, N.; Mitishita, E.; Gonçalves, J.

2014-11-01

Nowadays Unmanned Aerial Vehicle (UAV) technology has attracted attention for aerial photogrammetric mapping. The low cost and the feasibility to automatic flight along commanded waypoints can be considered as the main advantages of this technology in photogrammetric applications. Using GNSS/INS technologies the images are taken at the planned position of the exposure station and the exterior orientation parameters (position Xo, Yo, Zo and attitude ω, φ, χ) of images can be direct determined. However, common UAVs (off-the-shelf) do not replace the traditional aircraft platform. Overall, the main shortcomings are related to: difficulties to obtain the authorization to perform the flight in urban and rural areas, platform stability, safety flight, stability of the image block configuration, high number of the images and inaccuracies of the direct determination of the exterior orientation parameters of the images. In this paper are shown the obtained results from the project photogrammetric mapping using aerial images from the SIMEPAR UAV system. The PIPER J3 UAV Hydro aircraft was used. It has a micro pilot MP2128g. The system is fully integrated with 3-axis gyros/accelerometers, GPS, pressure altimeter, pressure airspeed sensors. A Sony Cyber-shot DSC-W300 was calibrated and used to get the image block. The flight height was close to 400 m, resulting GSD near to 0.10 m. The state of the art of the used technology, methodologies and the obtained results are shown and discussed. Finally advantages/shortcomings found in the study and main conclusions are presented

A laser scanning system for metrology and viewing in ITER

DOE Office of Scientific and Technical Information (OSTI.GOV)

Spampinato, P.T.; Barry, R.E.; Menon, M.M.

1996-05-01

The construction and operation of a next-generation fusion reactor will require metrology to achieve and verify precise alignment of plasma-facing components and inspection in the reactor vessel. The system must be compatible with the vessel environment of high gamma radiation (10{sup 4} Gy/h), ultra-high-vacuum (10{sup {minus}8} torr), and elevated temperature (200 C). The high radiation requires that the system be remotely deployed. A coherent frequency modulated laser radar-based system will be integrated with a remotely operated deployment mechanism to meet these requirements. The metrology/viewing system consists of a compact laser transceiver optics module which is linked through fiber optics tomore » the laser source and imaging units that are located outside of a biological shield. The deployment mechanism will be a mast-like positioning system. Radiation-damage tests will be conducted on critical sensor components at Oak Ridge National Laboratory to determine threshold damage levels and effects on data transmission. This paper identifies the requirements for International Thermonuclear Experimental Reactor metrology and viewing and describes a remotely operated precision ranging and surface mapping system.« less

Definition of a metrology servo-system for a solar imaging fourier transform spectrometer working in the far UV (IFTSUV)

NASA Astrophysics Data System (ADS)

Ruiz de Galarreta Fanju, C.; Philippon, A.; Bouzit, M.; Appourchaux, T.; Vial, J.-C.; Maillard, J.-P.; Lemaire, P.

2017-11-01

The understanding of the solar outer atmosphere requires a simultaneous combination of imaging and spectral observations concerning the far UV lines that arise from the high chromospheres up to the corona. These observations must be performed with enough spectral, spatial and temporal resolution to reveal the small atmospheric structures and to resolve the solar dynamics. An Imaging Fourier Transform Spectrometer working in the far-UV (IFTSUV, Figure 1) is an attractive instrumental solution to fulfill these requirements. However, due to the short wavelength, to preserve IFTSUV spectral precision and Signal to Noise Ratio (SNR) requires a high optical surface quality and a very accurate (linear and angular) metrology to maintain the optical path difference (OPD) during the entire scanning process by: optical path difference sampling trigger; and dynamic alignment for tip/tilt compensation (Figure 2).

3D wide field-of-view Gabor-domain optical coherence microscopy advancing real-time in-vivo imaging and metrology

NASA Astrophysics Data System (ADS)

Canavesi, Cristina; Cogliati, Andrea; Hayes, Adam; Tankam, Patrice; Santhanam, Anand; Rolland, Jannick P.

2017-02-01

Real-time volumetric high-definition wide-field-of-view in-vivo cellular imaging requires micron-scale resolution in 3D. Compactness of the handheld device and distortion-free images with cellular resolution are also critically required for onsite use in clinical applications. By integrating a custom liquid lens-based microscope and a dual-axis MEMS scanner in a compact handheld probe, Gabor-domain optical coherence microscopy (GD-OCM) breaks the lateral resolution limit of optical coherence tomography through depth, overcoming the tradeoff between numerical aperture and depth of focus, enabling advances in biotechnology. Furthermore, distortion-free imaging with no post-processing is achieved with a compact, lightweight handheld MEMS scanner that obtained a 12-fold reduction in volume and 17-fold reduction in weight over a previous dual-mirror galvanometer-based scanner. Approaching the holy grail of medical imaging - noninvasive real-time imaging with histologic resolution - GD-OCM demonstrates invariant resolution of 2 μm throughout a volume of 1 x 1 x 0.6 mm3, acquired and visualized in less than 2 minutes with parallel processing on graphics processing units. Results on the metrology of manufactured materials and imaging of human tissue with GD-OCM are presented.

Multi-stage classification method oriented to aerial image based on low-rank recovery and multi-feature fusion sparse representation.

PubMed

Ma, Xu; Cheng, Yongmei; Hao, Shuai

2016-12-10

Automatic classification of terrain surfaces from an aerial image is essential for an autonomous unmanned aerial vehicle (UAV) landing at an unprepared site by using vision. Diverse terrain surfaces may show similar spectral properties due to the illumination and noise that easily cause poor classification performance. To address this issue, a multi-stage classification algorithm based on low-rank recovery and multi-feature fusion sparse representation is proposed. First, color moments and Gabor texture feature are extracted from training data and stacked as column vectors of a dictionary. Then we perform low-rank matrix recovery for the dictionary by using augmented Lagrange multipliers and construct a multi-stage terrain classifier. Experimental results on an aerial map database that we prepared verify the classification accuracy and robustness of the proposed method.

Applicability of New Approaches of Sensor Orientation to Micro Aerial Vehicles

NASA Astrophysics Data System (ADS)

Rehak, M.; Skaloud, J.

2016-06-01

This study highlights the benefits of precise aerial position and attitude control in the context of mapping with Micro Aerial Vehicles (MAVs). Accurate mapping with MAVs is gaining importance in applications such as corridor mapping, road and pipeline inspections or mapping of large areas with homogeneous surface structure, e.g. forests or agricultural fields. There, accurate aerial control plays a major role in successful terrain reconstruction and artifact-free ortophoto generation. The presented experiments focus on new approaches of aerial control. We confirm practically that the relative aerial position and attitude control can improve accuracy in difficult mapping scenarios. Indeed, the relative orientation method represents an attractive alternative in the context of MAVs for two reasons. First, the procedure is somewhat simplified, e.g. the angular misalignment, so called boresight, between the camera and the inertial measurement unit (IMU) does not have to be determined and, second, the effect of possible systematic errors in satellite positioning (e.g. due to multipath and/or incorrect recovery of differential carrier-phase ambiguities) is mitigated. First, we present a typical mapping project over an agricultural field and second, we perform a corridor road mapping. We evaluate the proposed methods in scenarios with and without automated image observations. We investigate a recently proposed concept where adjustment is performed using image observations limited to ground control and check points, so called fast aerial triangulation (Fast AT). In this context we show that accurate aerial control (absolute or relative) together with a few image observations can deliver accurate results comparable to classical aerial triangulation with thousands of image measurements. This procedure in turns reduces the demands on processing time and the requirements on the existence of surface texture. Finally, we compare the above mentioned procedures with direct sensor

Coordinate metrology using scanning probe microscopes

NASA Astrophysics Data System (ADS)

Marinello, F.; Savio, E.; Bariani, P.; Carmignato, S.

2009-08-01

New positioning, probing and measuring strategies in coordinate metrology are needed for the accomplishment of true three-dimensional characterization of microstructures, with uncertainties in the nanometre range. In the present work, the implementation of scanning probe microscopes (SPMs) as systems for coordinate metrology is discussed. A new non-raster measurement approach is proposed, where the probe is moved to sense points along free paths on the sample surface, with no loss of accuracy with respect to traditional raster scanning and scan time reduction. Furthermore, new probes featuring long tips with innovative geometries suitable for coordinate metrology through SPMs are examined and reported.

Metrology in physics, chemistry, and biology: differing perceptions.

PubMed

Iyengar, Venkatesh

2007-04-01

The association of physics and chemistry with metrology (the science of measurements) is well documented. For practical purposes, basic metrological measurements in physics are governed by two components, namely, the measure (i.e., the unit of measurement) and the measurand (i.e., the entity measured), which fully account for the integrity of a measurement process. In simple words, in the case of measuring the length of a room (the measurand), the SI unit meter (the measure) provides a direct answer sustained by metrological concepts. Metrology in chemistry, as observed through physical chemistry (measures used to express molar relationships, volume, pressure, temperature, surface tension, among others) follows the same principles of metrology as in physics. The same basis percolates to classical analytical chemistry (gravimetry for preparing high-purity standards, related definitive analytical techniques, among others). However, certain transition takes place in extending the metrological principles to chemical measurements in complex chemical matrices (e.g., food samples), as it adds a third component, namely, indirect measurements (e.g., AAS determination of Zn in foods). This is a practice frequently used in field assays, and calls for additional steps to account for traceability of such chemical measurements for safeguarding reliability concerns. Hence, the assessment that chemical metrology is still evolving.

Optical metrology for Starlight Separated Spacecraft Stellar Interferometry Mission

NASA Technical Reports Server (NTRS)

Dubovitsky, S.; Lay, O. P.; Peters, R. D.; Abramovici, A.; Asbury, C. G.; Kuhnert, A. C.; Mulder, J. L.

2002-01-01

We describe a high-precision inter-spacecraft metrology system designed for NASA 's StarLight mission, a space-based separated-spacecraft stellar interferometer. It consists of dual-target linear metrology, based on a heterodyne interferometer with carrier phase modulation, and angular metrology designed to sense the pointing of the laser beam and provides bearing information. The dual-target operation enables one metrology beam to sense displacement of two targets independently. We present the current design, breadboard implementation of the Metrology Subsystem in a stellar interferometer testbed and the present state of development of flight qualifiable subsystem components.

Modelling and representation issues in automated feature extraction from aerial and satellite images

NASA Astrophysics Data System (ADS)

Sowmya, Arcot; Trinder, John

New digital systems for the processing of photogrammetric and remote sensing images have led to new approaches to information extraction for mapping and Geographic Information System (GIS) applications, with the expectation that data can become more readily available at a lower cost and with greater currency. Demands for mapping and GIS data are increasing as well for environmental assessment and monitoring. Hence, researchers from the fields of photogrammetry and remote sensing, as well as computer vision and artificial intelligence, are bringing together their particular skills for automating these tasks of information extraction. The paper will review some of the approaches used in knowledge representation and modelling for machine vision, and give examples of their applications in research for image understanding of aerial and satellite imagery.

Near Real-Time Georeference of Umanned Aerial Vehicle Images for Post-Earthquake Response

NASA Astrophysics Data System (ADS)

Wang, S.; Wang, X.; Dou, A.; Yuan, X.; Ding, L.; Ding, X.

2018-04-01

The rapid collection of Unmanned Aerial Vehicle (UAV) remote sensing images plays an important role in the fast submitting disaster information and the monitored serious damaged objects after the earthquake. However, for hundreds of UAV images collected in one flight sortie, the traditional data processing methods are image stitching and three-dimensional reconstruction, which take one to several hours, and affect the speed of disaster response. If the manual searching method is employed, we will spend much more time to select the images and the find images do not have spatial reference. Therefore, a near-real-time rapid georeference method for UAV remote sensing disaster data is proposed in this paper. The UAV images are achieved georeference combined with the position and attitude data collected by UAV flight control system, and the georeferenced data is organized by means of world file which is developed by ESRI. The C # language is adopted to compile the UAV images rapid georeference software, combined with Geospatial Data Abstraction Library (GDAL). The result shows that it can realize rapid georeference of remote sensing disaster images for up to one thousand UAV images within one minute, and meets the demand of rapid disaster response, which is of great value in disaster emergency application.

Low-cost, quantitative assessment of highway bridges through the use of unmanned aerial vehicles

NASA Astrophysics Data System (ADS)

Ellenberg, Andrew; Kontsos, Antonios; Moon, Franklin; Bartoli, Ivan

2016-04-01

Many envision that in the near future the application of Unmanned Aerial Vehicles (UAVs) will impact the civil engineering industry. Use of UAVs is currently experiencing tremendous growth, primarily in military and homeland security applications. It is only a matter of time until UAVs will be widely accepted as platforms for implementing monitoring/surveillance and inspection in other fields. Most UAVs already have payloads as well as hardware/software capabilities to incorporate a number of non-contact remote sensors, such as high resolution cameras, multi-spectral imaging systems, and laser ranging systems (LIDARs). Of critical importance to realizing the potential of UAVs within the infrastructure realm is to establish how (and the extent to which) such information may be used to inform preservation and renewal decisions. Achieving this will depend both on our ability to quantify information from images (through, for example, optical metrology techniques) and to fuse data from the array of non-contact sensing systems. Through a series of applications to both laboratory-scale and field implementations on operating infrastructure, this paper will present and evaluate (through comparison with conventional approaches) various image processing and data fusion strategies tailored specifically for the assessment of highway bridges. Example scenarios that guided this study include the assessment of delaminations within reinforced concrete bridge decks, the quantification of the deterioration of steel coatings, assessment of the functionality of movement mechanisms, and the estimation of live load responses (inclusive of both strain and displacement).

Temperature metrology

NASA Astrophysics Data System (ADS)

Fischer, J.; Fellmuth, B.

2005-05-01

The majority of the processes used by the manufacturing industry depend upon the accurate measurement and control of temperature. Thermal metrology is also a key factor affecting the efficiency and environmental impact of many high-energy industrial processes, the development of innovative products and the health and safety of the general population. Applications range from the processing, storage and shipment of perishable foodstuffs and biological materials to the development of more efficient and less environmentally polluting combustion processes for steel-making. Accurate measurement and control of temperature is, for instance, also important in areas such as the characterization of new materials used in the automotive, aerospace and semiconductor industries. This paper reviews the current status of temperature metrology. It starts with the determination of thermodynamic temperatures required on principle because temperature is an intensive quantity. Methods to determine thermodynamic temperatures are reviewed in detail to introduce the underlying physical basis. As these methods cannot usually be applied for practical measurements the need for a practical temperature scale for day-to-day work is motivated. The International Temperature Scale of 1990 and the Provisional Low Temperature Scale PLTS-2000 are described as important parts of the International System of Units to support science and technology. Its main importance becomes obvious in connection with industrial development and international markets. Every country is strongly interested in unique measures, in order to guarantee quality, reproducibility and functionability of products. The eventual realization of an international system, however, is only possible within the well-functioning organization of metrological laboratories. In developed countries the government established scientific institutes have certain metrological duties, as, for instance, the maintenance and dissemination of national

Metrology for the manufacturing of freeform optics

NASA Astrophysics Data System (ADS)

Blalock, Todd; Myer, Brian; Ferralli, Ian; Brunelle, Matt; Lynch, Tim

2017-10-01

Recently the use of freeform surfaces have become a realization for optical designers. These non-symmetrical optical surfaces have allowed unique solutions to optical design problems. The implementation of freeform optical surfaces has been limited by manufacturing capabilities and quality. However over the past several years freeform fabrication processes have improved in capability and precision. But as with any manufacturing, proper metrology is required to monitor and verify the process. Typical optics metrology such as interferometry has its challenges and limitations with the unique shapes of freeform optics. Two contact metrology methods for freeform metrology are presented; a Leitz coordinate measurement machine (CMM) with an uncertainty of +/- 0.5 μm and a high resolution profilometer (Panasonic UA3P) with a measurement uncertainty of +/- 0.05 μm. We are also developing a non-contact high resolution technique based on the fringe reflection technique known as deflectometry. This fast non-contact metrology has the potential to compete with accuracies of the contact methods but also can acquire data in seconds rather than minutes or hours.

Optical Metrology for the Segmented Optics on the Constellation-X Spectroscopy X-Ray Telescope

NASA Technical Reports Server (NTRS)

Content, David; Colella, David; Fleetwood, Charles; Hadjimichael, Theo; Lehan, John; McMann, Joseph; Reid, Paul; Saha, Timo; Wright, Geraldine; Zhang, William

2004-01-01

We present the metrology requirements and metrology implementation necessary to prove out the reflector technology for the Constellation X(C-X) spectroscopy X-ray telescope (SXT). This segmented, 1.6m diameter highly nested Wolter-1 telescope presents many metrology and alignment challenges. In particular, these mirrors have a stringent imaging error budget as compared to their intrinsic stiffness; This is required for Constellation-X to have sufficient effective area with the weight requirement. This has implications for the metrology that can be used. A variety of contract and noncontact optical profiling and interferometric methods are combined to test the formed glass substrates before replication and the replicated reflector segments.The reflectors are tested both stand-alone and in-situ in an alignment tower.Some of these methods have not been used on prior X-ray telescopes and some are feasible only because of the segmented approach used on the SXT. Methods discussed include high precision coordinate measurement machines using very low force or optical probe axial interferometric profiling azimuthal circularity profiling and use of advanced null optics such as conical computer generated hologram (CGHs).

FOREWORD: Materials metrology Materials metrology

NASA Astrophysics Data System (ADS)

Bennett, Seton; Valdés, Joaquin

2010-04-01

It seems that so much of modern life is defined by the materials we use. From aircraft to architecture, from cars to communications, from microelectronics to medicine, the development of new materials and the innovative application of existing ones have underpinned the technological advances that have transformed the way we live, work and play. Recognizing the need for a sound technical basis for drafting codes of practice and specifications for advanced materials, the governments of countries of the Economic Summit (G7) and the European Commission signed a Memorandum of Understanding in 1982 to establish the Versailles Project on Advanced Materials and Standards (VAMAS). This project supports international trade by enabling scientific collaboration as a precursor to the drafting of standards. The VAMAS participants recognized the importance of agreeing a reliable, universally accepted basis for the traceability of the measurements on which standards depend for their preparation and implementation. Seeing the need to involve the wider metrology community, VAMAS approached the Comité International des Poids et Mesures (CIPM). Following discussions with NMI Directors and a workshop at the BIPM in February 2005, the CIPM decided to establish an ad hoc Working Group on the metrology applicable to the measurement of material properties. The Working Group presented its conclusions to the CIPM in October 2007 and published its final report in 2008, leading to the signature of a Memorandum of Understanding between VAMAS and the BIPM. This MoU recognizes the work that is already going on in VAMAS as well as in the Consultative Committees of the CIPM and establishes a framework for an ongoing dialogue on issues of materials metrology. The question of what is meant by traceability in the metrology of the properties of materials is particularly vexed when the measurement results depend on a specified procedure. In these cases, confidence in results requires not only traceable

Monitoring and Assuring the Quality of Digital Aerial Data

NASA Technical Reports Server (NTRS)

Christopherson, Jon

2007-01-01

This viewgraph presentation explains the USGS plan for monitoring and assuring the quality of digital aerial data. The contents include: 1) History of USGS Aerial Imaging Involvement; 2) USGS Research and Results; 3) Outline of USGS Quality Assurance Plan; 4) Other areas of Interest; and 5) Summary

Optimizing Radiometric Fidelity to Enhance Aerial Image Change Detection Utilizing Digital Single Lens Reflex (DSLR) Cameras

NASA Astrophysics Data System (ADS)

Kerr, Andrew D.

Determining optimal imaging settings and best practices related to the capture of aerial imagery using consumer-grade digital single lens reflex (DSLR) cameras, should enable remote sensing scientists to generate consistent, high quality, and low cost image data sets. Radiometric optimization, image fidelity, image capture consistency and repeatability were evaluated in the context of detailed image-based change detection. The impetus for this research is in part, a dearth of relevant, contemporary literature, on the utilization of consumer grade DSLR cameras for remote sensing, and the best practices associated with their use. The main radiometric control settings on a DSLR camera, EV (Exposure Value), WB (White Balance), light metering, ISO, and aperture (f-stop), are variables that were altered and controlled over the course of several image capture missions. These variables were compared for their effects on dynamic range, intra-frame brightness variation, visual acuity, temporal consistency, and the detectability of simulated cracks placed in the images. This testing was conducted from a terrestrial, rather than an airborne collection platform, due to the large number of images per collection, and the desire to minimize inter-image misregistration. The results point to a range of slightly underexposed image exposure values as preferable for change detection and noise minimization fidelity. The makeup of the scene, the sensor, and aerial platform, influence the selection of the aperture and shutter speed which along with other variables, allow for estimation of the apparent image motion (AIM) motion blur in the resulting images. The importance of the image edges in the image application, will in part dictate the lowest usable f-stop, and allow the user to select a more optimal shutter speed and ISO. The single most important camera capture variable is exposure bias (EV), with a full dynamic range, wide distribution of DN values, and high visual contrast and

Low-resolution ship detection from high-altitude aerial images

NASA Astrophysics Data System (ADS)

Qi, Shengxiang; Wu, Jianmin; Zhou, Qing; Kang, Minyang

2018-02-01

Ship detection from optical images taken by high-altitude aircrafts such as unmanned long-endurance airships and unmanned aerial vehicles has broad applications in marine fishery management, ship monitoring and vessel salvage. However, the major challenge is the limited capability of information processing on unmanned high-altitude platforms. Furthermore, in order to guarantee the wide detection range, unmanned aircrafts generally cruise at high altitudes, resulting in imagery with low-resolution targets and strong clutters suffered by heavy clouds. In this paper, we propose a low-resolution ship detection method to extract ships from these high-altitude optical images. Inspired by a recent research on visual saliency detection indicating that small salient signals could be well detected by a gradient enhancement operation combined with Gaussian smoothing, we propose the facet kernel filtering to rapidly suppress cluttered backgrounds and delineate candidate target regions from the sea surface. Then, the principal component analysis (PCA) is used to compute the orientation of the target axis, followed by a simplified histogram of oriented gradient (HOG) descriptor to characterize the ship shape property. Finally, support vector machine (SVM) is applied to discriminate real targets and false alarms. Experimental results show that the proposed method actually has high efficiency in low-resolution ship detection.

Metrology and ionospheric observation standards

NASA Astrophysics Data System (ADS)

Panshin, Evgeniy; Minligareev, Vladimir; Pronin, Anton

Accuracy and ionospheric observation validity are urgent trends nowadays. WMO, URSI and national metrological and standardisation services bring forward requirements and descriptions of the ionospheric observation means. Researches in the sphere of metrological and standardisation observation moved to the next level in the Russian Federation. Fedorov Institute of Applied Geophysics (IAG) is in charge of ionospheric observation in the Russian Federation and the National Technical Committee, TC-101 , which was set up on the base of IAG- of the standardisation in the sphere. TC-101 can be the platform for initiation of the core international committee in the network of ISO The new type of the ionosounde “Parus-A” is engineered, which is up to the national requirements. “Parus-A” calibration and test were conducted by National metrological Institute (NMI) -D.I. Mendeleyev Institute for Metrology (VNIIM), signed CIMP MRA in 1991. VNIIM is a basic NMI in the sphere of Space weather (including ionospheric observations), the founder of which was celebrated chemist and metrologist Dmitriy I. Mendeleyev. Tests and calibration were carried out for the 1st time throughout 50-year-history of ionosonde exploitation in Russia. The following metrological characteristics were tested: -measurement range of radiofrequency time delay 0.5-10 ms; -time measurement inaccuracy of radio- frequency pulse ±12mcs; -frequency range of radio impulse 1-20 MHz ; -measurement inaccuracy of radio impulse carrier frequency± 5KHz. For example, the sound impulse simulator that was built-in in the ionosounde was used for measurement range of radiofrequency time delay testing. The number of standards on different levels is developed. - “Ionospheric observation guidance”; - “The Earth ionosphere. Terms and definitions”.

Aerial image measurement technique for automated reticle defect disposition (ARDD) in wafer fabs

NASA Astrophysics Data System (ADS)

Zibold, Axel M.; Schmid, Rainer M.; Stegemann, B.; Scheruebl, Thomas; Harnisch, Wolfgang; Kobiyama, Yuji

2004-08-01

The Aerial Image Measurement System (AIMS)* for 193 nm lithography emulation has been brought into operation successfully worldwide. A second generation system comprising 193 nm AIMS capability, mini-environment and SMIF, the AIMS fab 193 plus is currently introduced into the market. By adjustment of numerical aperture (NA), illumination type and partial illumination coherence to match the conditions in 193 nm steppers or scanners, it can emulate the exposure tool for any type of reticles like binary, OPC and PSM down to the 65 nm node. The system allows a rapid prediction of wafer printability of defects or defect repairs, and critical features, like dense patterns or contacts on the masks without the need to perform expensive image qualification consisting of test wafer exposures followed by SEM measurements. Therefore, AIMS is a mask quality verification standard for high-end photo masks and established in mask shops worldwide. The progress on the AIMS technology described in this paper will highlight that besides mask shops there will be a very beneficial use of the AIMS in the wafer fab and we propose an Automated Reticle Defect Disposition (ARDD) process. With smaller nodes, where design rules are 65 nm or less, it is expected that smaller defects on reticles will occur in increasing numbers in the wafer fab. These smaller mask defects will matter more and more and become a serious yield limiting factor. With increasing mask prices and increasing number of defects and severability on reticles it will become cost beneficial to perform defect disposition on the reticles in wafer production. Currently ongoing studies demonstrate AIMS benefits for wafer fab applications. An outlook will be given for extension of 193 nm aerial imaging down to the 45 nm node based on emulation of immersion scanners.

Metrology Careers: Jobs for Good Measure

ERIC Educational Resources Information Center

Liming, Drew

2009-01-01

What kind of career rewards precision and accuracy? One in metrology--the science of measurement. By evaluating and calibrating the technology in people's everyday lives, metrologists keep their world running smoothly. Metrology is used in the design and production of almost everything people encounter daily, from the cell phones in their pockets…

Mask Design for the Space Interferometry Mission Internal Metrology

NASA Technical Reports Server (NTRS)

Marx, David; Zhao, Feng; Korechoff, Robert

2005-01-01

This slide presentation reviews the mask design used for the internal metrology of the Space Interferometry Mission (SIM). Included is information about the project, the method of measurements with SIM, the internal metrology, numerical model of internal metrology, wavefront examples, performance metrics, and mask design

Diffraction-based overlay metrology for double patterning technologies

NASA Astrophysics Data System (ADS)

Dasari, Prasad; Korlahalli, Rahul; Li, Jie; Smith, Nigel; Kritsun, Oleg; Volkman, Cathy

2009-03-01

The extension of optical lithography to 32nm and beyond is made possible by Double Patterning Techniques (DPT) at critical levels of the process flow. The ease of DPT implementation is hindered by increased significance of critical dimension uniformity and overlay errors. Diffraction-based overlay (DBO) has shown to be an effective metrology solution for accurate determination of the overlay errors associated with double patterning [1, 2] processes. In this paper we will report its use in litho-freeze-litho-etch (LFLE) and spacer double patterning technology (SDPT), which are pitch splitting solutions that reduce the significance of overlay errors. Since the control of overlay between various mask/level combinations is critical for fabrication, precise and accurate assessment of errors by advanced metrology techniques such as spectroscopic diffraction based overlay (DBO) and traditional image-based overlay (IBO) using advanced target designs will be reported. A comparison between DBO, IBO and CD-SEM measurements will be reported. . A discussion of TMU requirements for 32nm technology and TMU performance data of LFLE and SDPT targets by different overlay approaches will be presented.

Automatic Sea Bird Detection from High Resolution Aerial Imagery

NASA Astrophysics Data System (ADS)

Mader, S.; Grenzdörffer, G. J.

2016-06-01

Great efforts are presently taken in the scientific community to develop computerized and (fully) automated image processing methods allowing for an efficient and automatic monitoring of sea birds and marine mammals in ever-growing amounts of aerial imagery. Currently the major part of the processing, however, is still conducted by especially trained professionals, visually examining the images and detecting and classifying the requested subjects. This is a very tedious task, particularly when the rate of void images regularly exceeds the mark of 90%. In the content of this contribution we will present our work aiming to support the processing of aerial images by modern methods from the field of image processing. We will especially focus on the combination of local, region-based feature detection and piecewise global image segmentation for automatic detection of different sea bird species. Large image dimensions resulting from the use of medium and large-format digital cameras in aerial surveys inhibit the applicability of image processing methods based on global operations. In order to efficiently handle those image sizes and to nevertheless take advantage of globally operating segmentation algorithms, we will describe the combined usage of a simple performant feature detector based on local operations on the original image with a complex global segmentation algorithm operating on extracted sub-images. The resulting exact segmentation of possible candidates then serves as a basis for the determination of feature vectors for subsequent elimination of false candidates and for classification tasks.

Improving OCD time to solution using Signal Response Metrology

NASA Astrophysics Data System (ADS)

Fang, Fang; Zhang, Xiaoxiao; Vaid, Alok; Pandev, Stilian; Sanko, Dimitry; Ramanathan, Vidya; Venkataraman, Kartik; Haupt, Ronny

2016-03-01

In recent technology nodes, advanced process and novel integration scheme have challenged the precision limits of conventional metrology; with critical dimensions (CD) of device reduce to sub-nanometer region. Optical metrology has proved its capability to precisely detect intricate details on the complex structures, however, conventional RCWA-based (rigorous coupled wave analysis) scatterometry has the limitations of long time-to-results and lack of flexibility to adapt to wide process variations. Signal Response Metrology (SRM) is a new metrology technique targeted to alleviate the consumption of engineering and computation resources by eliminating geometric/dispersion modeling and spectral simulation from the workflow. This is achieved by directly correlating the spectra acquired from a set of wafers with known process variations encoded. In SPIE 2015, we presented the results of SRM application in lithography metrology and control [1], accomplished the mission of setting up a new measurement recipe of focus/dose monitoring in hours. This work will demonstrate our recent field exploration of SRM implementation in 20nm technology and beyond, including focus metrology for scanner control; post etch geometric profile measurement, and actual device profile metrology.

Automatic digital surface model (DSM) generation from aerial imagery data

NASA Astrophysics Data System (ADS)

Zhou, Nan; Cao, Shixiang; He, Hongyan; Xing, Kun; Yue, Chunyu

2018-04-01

Aerial sensors are widely used to acquire imagery for photogrammetric and remote sensing application. In general, the images have large overlapped region, which provide a lot of redundant geometry and radiation information for matching. This paper presents a POS supported dense matching procedure for automatic DSM generation from aerial imagery data. The method uses a coarse-to-fine hierarchical strategy with an effective combination of several image matching algorithms: image radiation pre-processing, image pyramid generation, feature point extraction and grid point generation, multi-image geometrically constraint cross-correlation (MIG3C), global relaxation optimization, multi-image geometrically constrained least squares matching (MIGCLSM), TIN generation and point cloud filtering. The image radiation pre-processing is used in order to reduce the effects of the inherent radiometric problems and optimize the images. The presented approach essentially consists of 3 components: feature point extraction and matching procedure, grid point matching procedure and relational matching procedure. The MIGCLSM method is used to achieve potentially sub-pixel accuracy matches and identify some inaccurate and possibly false matches. The feasibility of the method has been tested on different aerial scale images with different landcover types. The accuracy evaluation is based on the comparison between the automatic extracted DSMs derived from the precise exterior orientation parameters (EOPs) and the POS.

An enhanced multi-view vertical line locus matching algorithm of object space ground primitives based on positioning consistency for aerial and space images

NASA Astrophysics Data System (ADS)

Zhang, Ka; Sheng, Yehua; Wang, Meizhen; Fu, Suxia

2018-05-01

The traditional multi-view vertical line locus (TMVLL) matching method is an object-space-based method that is commonly used to directly acquire spatial 3D coordinates of ground objects in photogrammetry. However, the TMVLL method can only obtain one elevation and lacks an accurate means of validating the matching results. In this paper, we propose an enhanced multi-view vertical line locus (EMVLL) matching algorithm based on positioning consistency for aerial or space images. The algorithm involves three components: confirming candidate pixels of the ground primitive in the base image, multi-view image matching based on the object space constraints for all candidate pixels, and validating the consistency of the object space coordinates with the multi-view matching result. The proposed algorithm was tested using actual aerial images and space images. Experimental results show that the EMVLL method successfully solves the problems associated with the TMVLL method, and has greater reliability, accuracy and computing efficiency.

Converting aerial imagery to application maps

USDA-ARS?s Scientific Manuscript database

Over the last couple of years in Agricultural Aviation and at the 2014 and 2015 NAAA conventions, we have written about and presented both single-camera and two-camera imaging systems for use on agricultural aircraft. Many aerial applicators have shown a great deal of interest in the imaging systems...

On the benefit of high resolution and low aberrations for in-die mask registration metrology

NASA Astrophysics Data System (ADS)

Beyer, Dirk; Seidel, Dirk; Heisig, Sven; Steinert, Steffen; Töpfer, Susanne; Scherübl, Thomas; Hetzler, Jochen

2014-10-01

With the introduction of complex lithography schemes like double and multi - patterning and new design principles like gridded designs with cut masks the requirements for mask to mask overlay have increased dramatically. Still, there are some good news too for the mask industry since more mask are needed and qualified. Although always confronted with throughput demands, latest writing tool developments are able to keep pace with ever increasing pattern placement specs not only for global signatures but for in-die features within the active area. Placement specs less than 3nm (max. 3 Sigma) are expected and needed in all cases in order to keep the mask contribution to the overall overlay budget at an accepted level. The qualification of these masks relies on high precision metrology tools which have to fulfill stringent metrology as well as resolution constrains at the same time. Furthermore, multi-patterning and gridded designs with pinhole type cut masks are drivers for a paradigm shift in registration metrology from classical registration crosses to in-die registration metrology on production features. These requirements result in several challenges for registration metrology tools. The resolution of the system must be sufficiently high to resolve small production features. At the same time tighter repeatability is required. Furthermore, tool induced shift (TIS) limit the accuracy of in-die measurements. This paper discusses and demonstrates the importance of low illumination wavelength together with low aberrations for best contrast imaging for in-die registration metrology. Typical effects like tool induced shift are analyzed and evaluated using the ZEISS PROVE® registration metrology tool. Additionally, we will address performance gains when going to higher resolution. The direct impact on repeatability for small features by registration measurements will be discussed as well.

Analysis of key technologies for virtual instruments metrology

NASA Astrophysics Data System (ADS)

Liu, Guixiong; Xu, Qingui; Gao, Furong; Guan, Qiuju; Fang, Qiang

2008-12-01

Virtual instruments (VIs) require metrological verification when applied as measuring instruments. Owing to the software-centered architecture, metrological evaluation of VIs includes two aspects: measurement functions and software characteristics. Complexity of software imposes difficulties on metrological testing of VIs. Key approaches and technologies for metrology evaluation of virtual instruments are investigated and analyzed in this paper. The principal issue is evaluation of measurement uncertainty. The nature and regularity of measurement uncertainty caused by software and algorithms can be evaluated by modeling, simulation, analysis, testing and statistics with support of powerful computing capability of PC. Another concern is evaluation of software features like correctness, reliability, stability, security and real-time of VIs. Technologies from software engineering, software testing and computer security domain can be used for these purposes. For example, a variety of black-box testing, white-box testing and modeling approaches can be used to evaluate the reliability of modules, components, applications and the whole VI software. The security of a VI can be assessed by methods like vulnerability scanning and penetration analysis. In order to facilitate metrology institutions to perform metrological verification of VIs efficiently, an automatic metrological tool for the above validation is essential. Based on technologies of numerical simulation, software testing and system benchmarking, a framework for the automatic tool is proposed in this paper. Investigation on implementation of existing automatic tools that perform calculation of measurement uncertainty, software testing and security assessment demonstrates the feasibility of the automatic framework advanced.

Draper Laboratory small autonomous aerial vehicle

NASA Astrophysics Data System (ADS)

DeBitetto, Paul A.; Johnson, Eric N.; Bosse, Michael C.; Trott, Christian A.

1997-06-01

The Charles Stark Draper Laboratory, Inc. and students from Massachusetts Institute of Technology and Boston University have cooperated to develop an autonomous aerial vehicle that won the 1996 International Aerial Robotics Competition. This paper describes the approach, system architecture and subsystem designs for the entry. This entry represents a combination of many technology areas: navigation, guidance, control, vision processing, human factors, packaging, power, real-time software, and others. The aerial vehicle, an autonomous helicopter, performs navigation and control functions using multiple sensors: differential GPS, inertial measurement unit, sonar altimeter, and a flux compass. The aerial transmits video imagery to the ground. A ground based vision processor converts the image data into target position and classification estimates. The system was designed, built, and flown in less than one year and has provided many lessons about autonomous vehicle systems, several of which are discussed. In an appendix, our current research in augmenting the navigation system with vision- based estimates is presented.

Entanglement-enhanced quantum metrology in a noisy environment

NASA Astrophysics Data System (ADS)

Wang, Kunkun; Wang, Xiaoping; Zhan, Xiang; Bian, Zhihao; Li, Jian; Sanders, Barry C.; Xue, Peng

2018-04-01

Quantum metrology overcomes standard precision limits and plays a central role in science and technology. Practically, it is vulnerable to imperfections such as decoherence. Here we demonstrate quantum metrology for noisy channels such that entanglement with ancillary qubits enhances the quantum Fisher information for phase estimation but not otherwise. Our photonic experiment covers a range of noise for various types of channels, including for two randomly alternating channels such that assisted entanglement fails for each noisy channel individually. We simulate noisy channels by implementing space-multiplexed dual interferometers with quantum photonic inputs. We demonstrate the advantage of entanglement-assisted protocols in a phase estimation experiment run with either a single-probe or multiprobe approach. These results establish that entanglement with ancillae is a valuable approach for delivering quantum-enhanced metrology. Our approach to entanglement-assisted quantum metrology via a simple linear-optical interferometric network with easy-to-prepare photonic inputs provides a path towards practical quantum metrology.

Object-based Image Classification of Arctic Sea Ice and Melt Ponds through Aerial Photos

NASA Astrophysics Data System (ADS)

Miao, X.; Xie, H.; Li, Z.; Lei, R.

2013-12-01

The last six years have marked the lowest Arctic summer sea ice extents in the modern era, with a new record summer minimum (3.4 million km2) set on 13 September 2012. It has been predicted that the Arctic could be free of summer ice within the next 25-30. The loss of Arctic summer ice could have serious consequences, such as higher water temperature due to the positive feedback of albedo, more powerful and frequent storms, rising sea levels, diminished habitats for polar animals, and more pollution due to fossil fuel exploitation and/ or increased traffic through the Northwest/ Northeast Passage. In these processes, melt ponds play an important role in Earth's radiation balance since they strongly absorb solar radiation rather than reflecting it as snow and ice do. Therefore, it is necessary to develop the ability of predicting the sea ice/ melt pond extents and space-time evolution, which is pivotal to prepare for the variation and uncertainty of the future environment, political, economic, and military needs. A lot of efforts have been put into Arctic sea ice modeling to simulate sea ice processes. However, these sea ice models were initiated and developed based on limited field surveys, aircraft or satellite image data. Therefore, it is necessary to collect high resolution sea ice aerial photo in a systematic way to tune up, validate, and improve models. Currently there are many sea ice aerial photos available, such as Chinese Arctic Exploration (CHINARE 2008, 2010, 2012), SHEBA 1998 and HOTRAX 2005. However, manually delineating of sea ice and melt pond from these images is time-consuming and labor-intensive. In this study, we use the object-based remote sensing classification scheme to extract sea ice and melt ponds efficiently from 1,727 aerial photos taken during the CHINARE 2010. The algorithm includes three major steps as follows. (1) Image segmentation groups the neighboring pixels into objects according to the similarity of spectral and texture

Assessment of the present NASA optical metrology capabilities and recommendations for establishing an in-house NASA Optical Metrology Group

NASA Technical Reports Server (NTRS)

Parks, Robert E.

1991-01-01

An investigation into when it was first recognized that there was a deficiency in NASA optical metrology oversight capability, why this deficiency existed unnoticed for so long, and a proposal for correcting the problem is presented. It is explained why this optical metrology oversight is so critical to program success and at the same time, why it is difficult to establish due to the nature of the technology. The solution proposed is the establishment of an Optics Metrology Group within the NASA/MSFC Optics Branch with a line of authority from NASA S & MA.

7/5nm logic manufacturing capabilities and requirements of metrology

NASA Astrophysics Data System (ADS)

Bunday, Benjamin; Bello, A. F.; Solecky, Eric; Vaid, Alok

2018-03-01

This paper will provide an update to previous works [2][4][9] to our view of the future for in-line high volume manufacturing (HVM) metrology for the semiconductor industry, concentrating on logic technology for foundries. First, we will review of the needs of patterned defect, critical dimensional (CD/3D), overlay and films metrology, and present the extensive list of applications for which metrology solutions are needed. We will then update the industry's progress towards addressing gating technical limits of the most important of these metrology solutions, highlighting key metrology technology gaps requiring industry attention and investment.

Online Aerial Terrain Mapping for Ground Robot Navigation

PubMed Central

Peterson, John; Chaudhry, Haseeb; Abdelatty, Karim; Bird, John; Kochersberger, Kevin

2018-01-01

This work presents a collaborative unmanned aerial and ground vehicle system which utilizes the aerial vehicle’s overhead view to inform the ground vehicle’s path planning in real time. The aerial vehicle acquires imagery which is assembled into a orthomosaic and then classified. These terrain classes are used to estimate relative navigation costs for the ground vehicle so energy-efficient paths may be generated and then executed. The two vehicles are registered in a common coordinate frame using a real-time kinematic global positioning system (RTK GPS) and all image processing is performed onboard the unmanned aerial vehicle, which minimizes the data exchanged between the vehicles. This paper describes the architecture of the system and quantifies the registration errors between the vehicles. PMID:29461496

Online Aerial Terrain Mapping for Ground Robot Navigation.

PubMed

Peterson, John; Chaudhry, Haseeb; Abdelatty, Karim; Bird, John; Kochersberger, Kevin

2018-02-20

This work presents a collaborative unmanned aerial and ground vehicle system which utilizes the aerial vehicle's overhead view to inform the ground vehicle's path planning in real time. The aerial vehicle acquires imagery which is assembled into a orthomosaic and then classified. These terrain classes are used to estimate relative navigation costs for the ground vehicle so energy-efficient paths may be generated and then executed. The two vehicles are registered in a common coordinate frame using a real-time kinematic global positioning system (RTK GPS) and all image processing is performed onboard the unmanned aerial vehicle, which minimizes the data exchanged between the vehicles. This paper describes the architecture of the system and quantifies the registration errors between the vehicles.

Deep machine learning based Image classification in hard disk drive manufacturing (Conference Presentation)

NASA Astrophysics Data System (ADS)

Rana, Narender; Chien, Chester

2018-03-01

A key sensor element in a Hard Disk Drive (HDD) is the read-write head device. The device is complex 3D shape and its fabrication requires over thousand process steps with many of them being various types of image inspection and critical dimension (CD) metrology steps. In order to have high yield of devices across a wafer, very tight inspection and metrology specifications are implemented. Many images are collected on a wafer and inspected for various types of defects and in CD metrology the quality of image impacts the CD measurements. Metrology noise need to be minimized in CD metrology to get better estimate of the process related variations for implementing robust process controls. Though there are specialized tools available for defect inspection and review allowing classification and statistics. However, due to unavailability of such advanced tools or other reasons, many times images need to be manually inspected. SEM Image inspection and CD-SEM metrology tools are different tools differing in software as well. SEM Image inspection and CD-SEM metrology tools are separate tools differing in software and purpose. There have been cases where a significant numbers of CD-SEM images are blurred or have some artefact and there is a need for image inspection along with the CD measurement. Tool may not report a practical metric highlighting the quality of image. Not filtering CD from these blurred images will add metrology noise to the CD measurement. An image classifier can be helpful here for filtering such data. This paper presents the use of artificial intelligence in classifying the SEM images. Deep machine learning is used to train a neural network which is then used to classify the new images as blurred and not blurred. Figure 1 shows the image blur artefact and contingency table of classification results from the trained deep neural network. Prediction accuracy of 94.9 % was achieved in the first model. Paper covers other such applications of the deep neural

Emerging technology for astronomical optics metrology

NASA Astrophysics Data System (ADS)

Trumper, Isaac; Jannuzi, Buell T.; Kim, Dae Wook

2018-05-01

Next generation astronomical optics will enable science discoveries across all fields and impact the way we perceive the Universe in which we live. To build these systems, optical metrology tools have been developed that push the boundary of what is possible. We present a summary of a few key metrology technologies that we believe are critical for the coming generation of optical surfaces.

Absolute metrology for space interferometers

NASA Astrophysics Data System (ADS)

Salvadé, Yves; Courteville, Alain; Dändliker, René

2017-11-01

The crucial issue of space-based interferometers is the laser interferometric metrology systems to monitor with very high accuracy optical path differences. Although classical high-resolution laser interferometers using a single wavelength are well developed, this type of incremental interferometer has a severe drawback: any interruption of the interferometer signal results in the loss of the zero reference, which requires a new calibration, starting at zero optical path difference. We propose in this paper an absolute metrology system based on multiplewavelength interferometry.

Vehicle detection in aerial surveillance using dynamic Bayesian networks.

PubMed

Cheng, Hsu-Yung; Weng, Chih-Chia; Chen, Yi-Ying

2012-04-01

We present an automatic vehicle detection system for aerial surveillance in this paper. In this system, we escape from the stereotype and existing frameworks of vehicle detection in aerial surveillance, which are either region based or sliding window based. We design a pixelwise classification method for vehicle detection. The novelty lies in the fact that, in spite of performing pixelwise classification, relations among neighboring pixels in a region are preserved in the feature extraction process. We consider features including vehicle colors and local features. For vehicle color extraction, we utilize a color transform to separate vehicle colors and nonvehicle colors effectively. For edge detection, we apply moment preserving to adjust the thresholds of the Canny edge detector automatically, which increases the adaptability and the accuracy for detection in various aerial images. Afterward, a dynamic Bayesian network (DBN) is constructed for the classification purpose. We convert regional local features into quantitative observations that can be referenced when applying pixelwise classification via DBN. Experiments were conducted on a wide variety of aerial videos. The results demonstrate flexibility and good generalization abilities of the proposed method on a challenging data set with aerial surveillance images taken at different heights and under different camera angles.

Toward reliable and repeatable automated STEM-EDS metrology with high throughput

NASA Astrophysics Data System (ADS)

Zhong, Zhenxin; Donald, Jason; Dutrow, Gavin; Roller, Justin; Ugurlu, Ozan; Verheijen, Martin; Bidiuk, Oleksii

2018-03-01

New materials and designs in complex 3D architectures in logic and memory devices have raised complexity in S/TEM metrology. In this paper, we report about a newly developed, automated, scanning transmission electron microscopy (STEM) based, energy dispersive X-ray spectroscopy (STEM-EDS) metrology method that addresses these challenges. Different methodologies toward repeatable and efficient, automated STEM-EDS metrology with high throughput are presented: we introduce the best known auto-EDS acquisition and quantification methods for robust and reliable metrology and present how electron exposure dose impacts the EDS metrology reproducibility, either due to poor signalto-noise ratio (SNR) at low dose or due to sample modifications at high dose conditions. Finally, we discuss the limitations of the STEM-EDS metrology technique and propose strategies to optimize the process both in terms of throughput and metrology reliability.

Automated Snow Extent Mapping Based on Orthophoto Images from Unmanned Aerial Vehicles

NASA Astrophysics Data System (ADS)

Niedzielski, Tomasz; Spallek, Waldemar; Witek-Kasprzak, Matylda

2018-04-01

The paper presents the application of the k-means clustering in the process of automated snow extent mapping using orthophoto images generated using the Structure-from-Motion (SfM) algorithm from oblique aerial photographs taken by unmanned aerial vehicle (UAV). A simple classification approach has been implemented to discriminate between snow-free and snow-covered terrain. The procedure uses the k-means clustering and classifies orthophoto images based on the three-dimensional space of red-green-blue (RGB) or near-infrared-red-green (NIRRG) or near-infrared-green-blue (NIRGB) bands. To test the method, several field experiments have been carried out, both in situations when snow cover was continuous and when it was patchy. The experiments have been conducted using three fixed-wing UAVs (swinglet CAM by senseFly, eBee by senseFly, and Birdie by FlyTech UAV) on 10/04/2015, 23/03/2016, and 16/03/2017 within three test sites in the Izerskie Mountains in southwestern Poland. The resulting snow extent maps, produced automatically using the classification method, have been validated against real snow extents delineated through a visual analysis and interpretation offered by human analysts. For the simplest classification setup, which assumes two classes in the k-means clustering, the extent of snow patches was estimated accurately, with areal underestimation of 4.6% (RGB) and overestimation of 5.5% (NIRGB). For continuous snow cover with sparse discontinuities at places where trees or bushes protruded from snow, the agreement between automatically produced snow extent maps and observations was better, i.e. 1.5% (underestimation with RGB) and 0.7-0.9% (overestimation, either with RGB or with NIRRG). Shadows on snow were found to be mainly responsible for the misclassification.

Comparison of binary mask defect printability analysis using virtual stepper system and aerial image microscope system

NASA Astrophysics Data System (ADS)

Phan, Khoi A.; Spence, Chris A.; Dakshina-Murthy, S.; Bala, Vidya; Williams, Alvina M.; Strener, Steve; Eandi, Richard D.; Li, Junling; Karklin, Linard

1999-12-01

As advanced process technologies in the wafer fabs push the patterning processes toward lower k1 factor for sub-wavelength resolution printing, reticles are required to use optical proximity correction (OPC) and phase-shifted mask (PSM) for resolution enhancement. For OPC/PSM mask technology, defect printability is one of the major concerns. Current reticle inspection tools available on the market sometimes are not capable of consistently differentiating between an OPC feature and a true random defect. Due to the process complexity and high cost associated with the making of OPC/PSM reticles, it is important for both mask shops and lithography engineers to understand the impact of different defect types and sizes to the printability. Aerial Image Measurement System (AIMS) has been used in the mask shops for a number of years for reticle applications such as aerial image simulation and transmission measurement of repaired defects. The Virtual Stepper System (VSS) provides an alternative method to do defect printability simulation and analysis using reticle images captured by an optical inspection or review system. In this paper, pre- programmed defects and repairs from a Defect Sensitivity Monitor (DSM) reticle with 200 nm minimum features (at 1x) will be studied for printability. The simulated resist lines by AIMS and VSS are both compared to SEM images of resist wafers qualitatively and quantitatively using CD verification.Process window comparison between unrepaired and repaired defects for both good and bad repair cases will be shown. The effect of mask repairs to resist pattern images for the binary mask case will be discussed. AIMS simulation was done at the International Sematech, Virtual stepper simulation at Zygo and resist wafers were processed at AMD-Submicron Development Center using a DUV lithographic process for 0.18 micrometer Logic process technology.

Hybrid Metrology and 3D-AFM Enhancement for CD Metrology Dedicated to 28 nm Node and Below Requirements

DOE Office of Scientific and Technical Information (OSTI.GOV)

Foucher, J.; Faurie, P.; Dourthe, L.

2011-11-10

The measurement accuracy is becoming one of the major components that have to be controlled in order to guarantee sufficient production yield. Already at the R and D level, we have to come up with the accurate measurements of sub-40 nm dense trenches and contact holes coming from 193 immersion lithography or E-Beam lithography. Current production CD (Critical Dimension) metrology techniques such as CD-SEM (CD-Scanning Electron Microscope) and OCD (Optical Critical Dimension) are limited in relative accuracy for various reasons (i.e electron proximity effect, outputs parameters correlation, stack influence, electron interaction with materials...). Therefore, time for R and D ismore » increasing, process windows degrade and finally production yield can decrease because you cannot manufactured correctly if you are unable to measure correctly. A new high volume manufacturing (HVM) CD metrology solution has to be found in order to improve the relative accuracy of production environment otherwise current CD Metrology solution will very soon get out of steam.In this paper, we will present a potential Hybrid CD metrology solution that smartly tuned 3D-AFM (3D-Atomic Force Microscope) and CD-SEM data in order to add accuracy both in R and D and production. The final goal for 'chip makers' is to improve yield and save R and D and production costs through real-time feedback loop implement on CD metrology routines. Such solution can be implemented and extended to any kind of CD metrology solution. In a 2{sup nd} part we will discuss and present results regarding a new AFM3D probes breakthrough with the introduction of full carbon tips made will E-Beam Deposition process. The goal is to overcome the current limitations of conventional flared silicon tips which are definitely not suitable for sub-32 nm nodes production.« less

Gaps analysis for CD metrology beyond the 22nm node

NASA Astrophysics Data System (ADS)

Bunday, Benjamin; Germer, Thomas A.; Vartanian, Victor; Cordes, Aaron; Cepler, Aron; Settens, Charles

2013-04-01

This paper will examine the future for critical dimension (CD) metrology. First, we will present the extensive list of applications for which CD metrology solutions are needed, showing commonalities and differences among the various applications. We will then report on the expected technical limits of the metrology solutions currently being investigated by SEMATECH and others in the industry to address the metrology challenges of future nodes, including conventional CD scanning electron microscopy (CD-SEM) and optical critical dimension (OCD) metrology and new potential solutions such as He-ion microscopy (HeIM, sometimes elsewhere referred to as HIM), CD atomic force microscopy (CD-AFM), CD small-angle x-ray scattering (CD-SAXS), high-voltage scanning electron microscopy (HV-SEM), and other types. A technical gap analysis matrix will then be demonstrated, showing the current state of understanding of the future of the CD metrology space.

Aerial vehicles collision avoidance using monocular vision

NASA Astrophysics Data System (ADS)

Balashov, Oleg; Muraviev, Vadim; Strotov, Valery

2016-10-01

In this paper image-based collision avoidance algorithm that provides detection of nearby aircraft and distance estimation is presented. The approach requires a vision system with a single moving camera and additional information about carrier's speed and orientation from onboard sensors. The main idea is to create a multi-step approach based on a preliminary detection, regions of interest (ROI) selection, contour segmentation, object matching and localization. The proposed algorithm is able to detect small targets but unlike many other approaches is designed to work with large-scale objects as well. To localize aerial vehicle position the system of equations relating object coordinates in space and observed image is solved. The system solution gives the current position and speed of the detected object in space. Using this information distance and time to collision can be estimated. Experimental research on real video sequences and modeled data is performed. Video database contained different types of aerial vehicles: aircrafts, helicopters, and UAVs. The presented algorithm is able to detect aerial vehicles from several kilometers under regular daylight conditions.

Geometric Calibration and Validation of Ultracam Aerial Sensors

NASA Astrophysics Data System (ADS)

Gruber, Michael; Schachinger, Bernhard; Muick, Marc; Neuner, Christian; Tschemmernegg, Helfried

2016-03-01

We present details of the calibration and validation procedure of UltraCam Aerial Camera systems. Results from the laboratory calibration and from validation flights are presented for both, the large format nadir cameras and the oblique cameras as well. Thus in this contribution we show results from the UltraCam Eagle and the UltraCam Falcon, both nadir mapping cameras, and the UltraCam Osprey, our oblique camera system. This sensor offers a mapping grade nadir component together with the four oblique camera heads. The geometric processing after the flight mission is being covered by the UltraMap software product. Thus we present details about the workflow as well. The first part consists of the initial post-processing which combines image information as well as camera parameters derived from the laboratory calibration. The second part, the traditional automated aerial triangulation (AAT) is the step from single images to blocks and enables an additional optimization process. We also present some special features of our software, which are designed to better support the operator to analyze large blocks of aerial images and to judge the quality of the photogrammetric set-up.

Detection of rice sheath blight using an unmanned aerial system with high-resolution color and multispectral imaging.

PubMed

Zhang, Dongyan; Zhou, Xingen; Zhang, Jian; Lan, Yubin; Xu, Chao; Liang, Dong

2018-01-01

Detection and monitoring are the first essential step for effective management of sheath blight (ShB), a major disease in rice worldwide. Unmanned aerial systems have a high potential of being utilized to improve this detection process since they can reduce the time needed for scouting for the disease at a field scale, and are affordable and user-friendly in operation. In this study, a commercialized quadrotor unmanned aerial vehicle (UAV), equipped with digital and multispectral cameras, was used to capture imagery data of research plots with 67 rice cultivars and elite lines. Collected imagery data were then processed and analyzed to characterize the development of ShB and quantify different levels of the disease in the field. Through color features extraction and color space transformation of images, it was found that the color transformation could qualitatively detect the infected areas of ShB in the field plots. However, it was less effective to detect different levels of the disease. Five vegetation indices were then calculated from the multispectral images, and ground truths of disease severity and GreenSeeker measured NDVI (Normalized Difference Vegetation Index) were collected. The results of relationship analyses indicate that there was a strong correlation between ground-measured NDVIs and image-extracted NDVIs with the R2 of 0.907 and the root mean square error (RMSE) of 0.0854, and a good correlation between image-extracted NDVIs and disease severity with the R2 of 0.627 and the RMSE of 0.0852. Use of image-based NDVIs extracted from multispectral images could quantify different levels of ShB in the field plots with an accuracy of 63%. These results demonstrate that a customer-grade UAV integrated with digital and multispectral cameras can be an effective tool to detect the ShB disease at a field scale.

Kite Aerial Photography (KAP) as a Tool for Field Teaching

ERIC Educational Resources Information Center

Sander, Lasse

2014-01-01

Kite aerial photography (KAP) is proposed as a creative tool for geography field teaching and as a medium to approach the complexity of readily available geodata. The method can be integrated as field experiment, surveying technique or group activity. The acquired aerial images can instantaneously be integrated in geographic information systems…

Precision measurements from very-large scale aerial digital imagery.

PubMed

Booth, D Terrance; Cox, Samuel E; Berryman, Robert D

2006-01-01

Managers need measurements and resource managers need the length/width of a variety of items including that of animals, logs, streams, plant canopies, man-made objects, riparian habitat, vegetation patches and other things important in resource monitoring and land inspection. These types of measurements can now be easily and accurately obtained from very large scale aerial (VLSA) imagery having spatial resolutions as fine as 1 millimeter per pixel by using the three new software programs described here. VLSA images have small fields of view and are used for intermittent sampling across extensive landscapes. Pixel-coverage among images is influenced by small changes in airplane altitude above ground level (AGL) and orientation relative to the ground, as well as by changes in topography. These factors affect the object-to-camera distance used for image-resolution calculations. 'ImageMeasurement' offers a user-friendly interface for accounting for pixel-coverage variation among images by utilizing a database. 'LaserLOG' records and displays airplane altitude AGL measured from a high frequency laser rangefinder, and displays the vertical velocity. 'Merge' sorts through large amounts of data generated by LaserLOG and matches precise airplane altitudes with camera trigger times for input to the ImageMeasurement database. We discuss application of these tools, including error estimates. We found measurements from aerial images (collection resolution: 5-26 mm/pixel as projected on the ground) using ImageMeasurement, LaserLOG, and Merge, were accurate to centimeters with an error less than 10%. We recommend these software packages as a means for expanding the utility of aerial image data.

Learning Scene Categories from High Resolution Satellite Image for Aerial Video Analysis

DOE Office of Scientific and Technical Information (OSTI.GOV)

Cheriyadat, Anil M

2011-01-01

Automatic scene categorization can benefit various aerial video processing applications. This paper addresses the problem of predicting the scene category from aerial video frames using a prior model learned from satellite imagery. We show that local and global features in the form of line statistics and 2-D power spectrum parameters respectively can characterize the aerial scene well. The line feature statistics and spatial frequency parameters are useful cues to distinguish between different urban scene categories. We learn the scene prediction model from highresolution satellite imagery to test the model on the Columbus Surrogate Unmanned Aerial Vehicle (CSUAV) dataset ollected bymore » high-altitude wide area UAV sensor platform. e compare the proposed features with the popular Scale nvariant Feature Transform (SIFT) features. Our experimental results show that proposed approach outperforms te SIFT model when the training and testing are conducted n disparate data sources.« less

NASA metrology and calibration, 1993

NASA Technical Reports Server (NTRS)

1993-01-01

Th sixteenth annual workshop of NASA's Metrology and Calibration Working Group was held April 20-22, 1993. The goals of the Working Group are to provide Agencywide standardization of individual metrology programs, where appropriate; to promote cooperation and exchange of information within NASA, with other Government agencies, and with industry; to serve as the primary Agency interface with the National Institute of Standards and Technology; and to encourage formal quality control techniques such as Measurement Assurance Programs. These proceedings contain unedited reports and presentations from the workshop and are provided for information only.

Comparison of DSMs acquired by terrestrial laser scanning, UAV-based aerial images and ground-based optical images at the Super-Sauze landslide

NASA Astrophysics Data System (ADS)

Rothmund, Sabrina; Niethammer, Uwe; Walter, Marco; Joswig, Manfred

2013-04-01

In recent years, the high-resolution and multi-temporal 3D mapping of the Earth's surface using terrestrial laser scanning (TLS), ground-based optical images and especially low-cost UAV-based aerial images (Unmanned Aerial Vehicle) has grown in importance. This development resulted from the progressive technical improvement of the imaging systems and the freely available multi-view stereo (MVS) software packages. These different methods of data acquisition for the generation of accurate, high-resolution digital surface models (DSMs) were applied as part of an eight-week field campaign at the Super-Sauze landslide (South French Alps). An area of approximately 10,000 m² with long-term average displacement rates greater than 0.01 m/day has been investigated. The TLS-based point clouds were acquired at different viewpoints with an average point spacing between 10 to 40 mm and at different dates. On these days, more than 50 optical images were taken on points along a predefined line on the side part of the landslide by a low-cost digital compact camera. Additionally, aerial images were taken by a radio-controlled mini quad-rotor UAV equipped with another low-cost digital compact camera. The flight altitude ranged between 20 m and 250 m and produced a corresponding ground resolution between 0.6 cm and 7 cm. DGPS measurements were carried out as well in order to geo-reference and validate the point cloud data. To generate unscaled photogrammetric 3D point clouds from a disordered and tilted image set, we use the widespread open-source software package Bundler and PMVS2 (University of Washington). These multi-temporal DSMs are required on the one hand to determine the three-dimensional surface deformations and on the other hand it will be required for differential correction for orthophoto production. Drawing on the example of the acquired data at the Super-Sauze landslide, we demonstrate the potential but also the limitations of the photogrammetric point clouds. To

3D-profile measurement of advanced semiconductor features by using FIB as reference metrology

NASA Astrophysics Data System (ADS)

Takamasu, Kiyoshi; Iwaki, Yuuki; Takahashi, Satoru; Kawada, Hiroki; Ikota, Masami

2017-03-01

A novel method of sub-nanometer uncertainty for the 3D-profile measurement and LWR (Line Width Roughness) measurement by using FIB (Focused Ion Beam) processing, and TEM (Transmission Electron Microscope) and CD-SEM (Critical Dimension Scanning Electron Microscope) images measurement is proposed to standardize 3D-profile measurement through reference metrology. In this article, we apply the methodology to line profile measurements and roughness measurement of advanced FinFET (Fin-shaped Field-Effect Transistor) features. The FinFET features are horizontally sliced as a thin specimen by FIB micro sampling system. Horizontally images of the specimens are obtained then by a planar TEM. LWR is calculated from the edges positions on TEM images. Moreover, we already have demonstrated the novel on-wafer 3D-profile metrology as "FIB-to-CDSEM method" with FIB slope cut and CD-SEM measuring. Using the method, a few micrometers wide on a wafer is coated and cut by 45-degree slope using FIB tool. Then, the wafer is transferred to CD-SEM to measure the cross section image by top down CD-SEM measurement. We applied FIB-to-CDSEM method to a CMOS image sensor feature. The 45-degree slope cut surface is observed using AFM. The surface profile of slope cut surface and line profiles are analyzed for improving the accuracy of FIB-to-CDSEM method.

A Two-Stream Deep Fusion Framework for High-Resolution Aerial Scene Classification

PubMed Central

Liu, Fuxian

2018-01-01

One of the challenging problems in understanding high-resolution remote sensing images is aerial scene classification. A well-designed feature representation method and classifier can improve classification accuracy. In this paper, we construct a new two-stream deep architecture for aerial scene classification. First, we use two pretrained convolutional neural networks (CNNs) as feature extractor to learn deep features from the original aerial image and the processed aerial image through saliency detection, respectively. Second, two feature fusion strategies are adopted to fuse the two different types of deep convolutional features extracted by the original RGB stream and the saliency stream. Finally, we use the extreme learning machine (ELM) classifier for final classification with the fused features. The effectiveness of the proposed architecture is tested on four challenging datasets: UC-Merced dataset with 21 scene categories, WHU-RS dataset with 19 scene categories, AID dataset with 30 scene categories, and NWPU-RESISC45 dataset with 45 challenging scene categories. The experimental results demonstrate that our architecture gets a significant classification accuracy improvement over all state-of-the-art references. PMID:29581722

A Two-Stream Deep Fusion Framework for High-Resolution Aerial Scene Classification.

PubMed

Yu, Yunlong; Liu, Fuxian

2018-01-01

One of the challenging problems in understanding high-resolution remote sensing images is aerial scene classification. A well-designed feature representation method and classifier can improve classification accuracy. In this paper, we construct a new two-stream deep architecture for aerial scene classification. First, we use two pretrained convolutional neural networks (CNNs) as feature extractor to learn deep features from the original aerial image and the processed aerial image through saliency detection, respectively. Second, two feature fusion strategies are adopted to fuse the two different types of deep convolutional features extracted by the original RGB stream and the saliency stream. Finally, we use the extreme learning machine (ELM) classifier for final classification with the fused features. The effectiveness of the proposed architecture is tested on four challenging datasets: UC-Merced dataset with 21 scene categories, WHU-RS dataset with 19 scene categories, AID dataset with 30 scene categories, and NWPU-RESISC45 dataset with 45 challenging scene categories. The experimental results demonstrate that our architecture gets a significant classification accuracy improvement over all state-of-the-art references.

Photogrammetric Metrology for the James Webb Space Telescope Integrated Science Instrument Module

NASA Technical Reports Server (NTRS)

Nowak, Maria; Crane, Allen; Davila, Pam; Eichhorn, William; Gill, James; Herrera, Acey; Hill, Michael; Hylan, Jason; Jetten, Mark; Marsh, James;

Traceable quantum sensing and metrology relied up a quantum electrical triangle principle

NASA Astrophysics Data System (ADS)

Fang, Yan; Wang, Hengliang; Yang, Xinju; Wei, Jingsong

2016-11-01

Hybrid quantum state engineering in quantum communication and imaging1-2 needs traceable quantum sensing and metrology, which are especially critical to quantum internet3 and precision measurements4 that are important across all fields of science and technology-. We aim to set up a mode of traceable quantum sensing and metrology. We developed a method by specially transforming an atomic force microscopy (AFM) and a scanning tunneling microscopy (STM) into a conducting atomic force microscopy (C-AFM) with a feedback control loop, wherein quantum entanglement enabling higher precision was relied upon a set-point, a visible light laser beam-controlled an interferometer with a surface standard at z axis, diffractometers with lateral standards at x-y axes, four-quadrant photodiode detectors, a scanner and its image software, a phase-locked pre-amplifier, a cantilever with a kHz Pt/Au conducting tip, a double barrier tunneling junction model, a STM circuit by frequency modulation and a quantum electrical triangle principle involving single electron tunneling effect, quantum Hall effect and Josephson effect5. The average and standard deviation result of repeated measurements on a 1 nm height local micro-region of nanomedicine crystal hybrid quantum state engineering surface and its differential pA level current and voltage (dI/dV) in time domains by using C-AFM was converted into an international system of units: Siemens (S), an indicated value 0.86×10-12 S (n=6) of a relative standard uncertainty was superior over a relative standard uncertainty reference value 2.3×10-10 S of 2012 CODADA quantized conductance6. It is concluded that traceable quantum sensing and metrology is emerging.

D Surface Generation from Aerial Thermal Imagery

NASA Astrophysics Data System (ADS)

Khodaei, B.; Samadzadegan, F.; Dadras Javan, F.; Hasani, H.

2015-12-01

Aerial thermal imagery has been recently applied to quantitative analysis of several scenes. For the mapping purpose based on aerial thermal imagery, high accuracy photogrammetric process is necessary. However, due to low geometric resolution and low contrast of thermal imaging sensors, there are some challenges in precise 3D measurement of objects. In this paper the potential of thermal video in 3D surface generation is evaluated. In the pre-processing step, thermal camera is geometrically calibrated using a calibration grid based on emissivity differences between the background and the targets. Then, Digital Surface Model (DSM) generation from thermal video imagery is performed in four steps. Initially, frames are extracted from video, then tie points are generated by Scale-Invariant Feature Transform (SIFT) algorithm. Bundle adjustment is then applied and the camera position and orientation parameters are determined. Finally, multi-resolution dense image matching algorithm is used to create 3D point cloud of the scene. Potential of the proposed method is evaluated based on thermal imaging cover an industrial area. The thermal camera has 640×480 Uncooled Focal Plane Array (UFPA) sensor, equipped with a 25 mm lens which mounted in the Unmanned Aerial Vehicle (UAV). The obtained results show the comparable accuracy of 3D model generated based on thermal images with respect to DSM generated from visible images, however thermal based DSM is somehow smoother with lower level of texture. Comparing the generated DSM with the 9 measured GCPs in the area shows the Root Mean Square Error (RMSE) value is smaller than 5 decimetres in both X and Y directions and 1.6 meters for the Z direction.

A fast and mobile system for registration of low-altitude visual and thermal aerial images using multiple small-scale UAVs

NASA Astrophysics Data System (ADS)

Yahyanejad, Saeed; Rinner, Bernhard

2015-06-01

The use of multiple small-scale UAVs to support first responders in disaster management has become popular because of their speed and low deployment costs. We exploit such UAVs to perform real-time monitoring of target areas by fusing individual images captured from heterogeneous aerial sensors. Many approaches have already been presented to register images from homogeneous sensors. These methods have demonstrated robustness against scale, rotation and illumination variations and can also cope with limited overlap among individual images. In this paper we focus on thermal and visual image registration and propose different methods to improve the quality of interspectral registration for the purpose of real-time monitoring and mobile mapping. Images captured by low-altitude UAVs represent a very challenging scenario for interspectral registration due to the strong variations in overlap, scale, rotation, point of view and structure of such scenes. Furthermore, these small-scale UAVs have limited processing and communication power. The contributions of this paper include (i) the introduction of a feature descriptor for robustly identifying corresponding regions of images in different spectrums, (ii) the registration of image mosaics, and (iii) the registration of depth maps. We evaluated the first method using a test data set consisting of 84 image pairs. In all instances our approach combined with SIFT or SURF feature-based registration was superior to the standard versions. Although we focus mainly on aerial imagery, our evaluation shows that the presented approach would also be beneficial in other scenarios such as surveillance and human detection. Furthermore, we demonstrated the advantages of the other two methods in case of multiple image pairs.

Two Approaches to Calibration in Metrology

DOE Office of Scientific and Technical Information (OSTI.GOV)

Campanelli, Mark

2014-04-01

Inferring mathematical relationships with quantified uncertainty from measurement data is common to computational science and metrology. Sufficient knowledge of measurement process noise enables Bayesian inference. Otherwise, an alternative approach is required, here termed compartmentalized inference, because collection of uncertain data and model inference occur independently. Bayesian parameterized model inference is compared to a Bayesian-compatible compartmentalized approach for ISO-GUM compliant calibration problems in renewable energy metrology. In either approach, model evidence can help reduce model discrepancy.

Integrating dynamic and distributed compressive sensing techniques to enhance image quality of the compressive line sensing system for unmanned aerial vehicles application

NASA Astrophysics Data System (ADS)

Ouyang, Bing; Hou, Weilin; Caimi, Frank M.; Dalgleish, Fraser R.; Vuorenkoski, Anni K.; Gong, Cuiling

2017-07-01

The compressive line sensing imaging system adopts distributed compressive sensing (CS) to acquire data and reconstruct images. Dynamic CS uses Bayesian inference to capture the correlated nature of the adjacent lines. An image reconstruction technique that incorporates dynamic CS in the distributed CS framework was developed to improve the quality of reconstructed images. The effectiveness of the technique was validated using experimental data acquired in an underwater imaging test facility. Results that demonstrate contrast and resolution improvements will be presented. The improved efficiency is desirable for unmanned aerial vehicles conducting long-duration missions.

A new approach to pattern metrology

NASA Astrophysics Data System (ADS)

Ausschnitt, Christopher P.

2004-05-01

We describe an approach to pattern metrology that enables the simultaneous determination of critical dimensions, overlay and film thickness. A single optical system captures nonzero- and zero-order diffracted signals from illuminated grating targets, as well as unpatterned regions of the surrounding substrate. Differential targets provide in situ dimensional calibration. CD target signals are analyzed to determine average dimension, profile attributes, and effective dose and defocus. In turn, effective dose and defocus determines all CDs pre-correlated to the dose and focus settings of the exposure tool. Overlay target signals are analyzed to determine the relative reflectivity of the layer pair and the overlay error between them. Compared to commercially available pattern metrology (SEM, optical microscopy, AFM, scatterometry and schnitzlometry), our approach promises improved signal-to-noise, higher throughput and smaller targets. We have dubbed this optical chimera MOXIE (Metrology Of eXtremely Irrational Exuberance).

Towards collaboration between unmanned aerial and ground vehicles for precision agriculture

NASA Astrophysics Data System (ADS)

Bhandari, Subodh; Raheja, Amar; Green, Robert L.; Do, Dat

2017-05-01

This paper presents the work being conducted at Cal Poly Pomona on the collaboration between unmanned aerial and ground vehicles for precision agriculture. The unmanned aerial vehicles (UAVs), equipped with multispectral/hyperspectral cameras and RGB cameras, take images of the crops while flying autonomously. The images are post processed or can be processed onboard. The processed images are used in the detection of unhealthy plants. Aerial data can be used by the UAVs and unmanned ground vehicles (UGVs) for various purposes including care of crops, harvest estimation, etc. The images can also be useful for optimized harvesting by isolating low yielding plants. These vehicles can be operated autonomously with limited or no human intervention, thereby reducing cost and limiting human exposure to agricultural chemicals. The paper discuss the autonomous UAV and UGV platforms used for the research, sensor integration, and experimental testing. Methods for ground truthing the results obtained from the UAVs will be used. The paper will also discuss equipping the UGV with a robotic arm for removing the unhealthy plants and/or weeds.

Combining Human Computing and Machine Learning to Make Sense of Big (Aerial) Data for Disaster Response.

PubMed

Ofli, Ferda; Meier, Patrick; Imran, Muhammad; Castillo, Carlos; Tuia, Devis; Rey, Nicolas; Briant, Julien; Millet, Pauline; Reinhard, Friedrich; Parkan, Matthew; Joost, Stéphane

2016-03-01

Aerial imagery captured via unmanned aerial vehicles (UAVs) is playing an increasingly important role in disaster response. Unlike satellite imagery, aerial imagery can be captured and processed within hours rather than days. In addition, the spatial resolution of aerial imagery is an order of magnitude higher than the imagery produced by the most sophisticated commercial satellites today. Both the United States Federal Emergency Management Agency (FEMA) and the European Commission's Joint Research Center (JRC) have noted that aerial imagery will inevitably present a big data challenge. The purpose of this article is to get ahead of this future challenge by proposing a hybrid crowdsourcing and real-time machine learning solution to rapidly process large volumes of aerial data for disaster response in a time-sensitive manner. Crowdsourcing can be used to annotate features of interest in aerial images (such as damaged shelters and roads blocked by debris). These human-annotated features can then be used to train a supervised machine learning system to learn to recognize such features in new unseen images. In this article, we describe how this hybrid solution for image analysis can be implemented as a module (i.e., Aerial Clicker) to extend an existing platform called Artificial Intelligence for Disaster Response (AIDR), which has already been deployed to classify microblog messages during disasters using its Text Clicker module and in response to Cyclone Pam, a category 5 cyclone that devastated Vanuatu in March 2015. The hybrid solution we present can be applied to both aerial and satellite imagery and has applications beyond disaster response such as wildlife protection, human rights, and archeological exploration. As a proof of concept, we recently piloted this solution using very high-resolution aerial photographs of a wildlife reserve in Namibia to support rangers with their wildlife conservation efforts (SAVMAP project, http://lasig.epfl.ch/savmap ). The

Reducing measurement uncertainty drives the use of multiple technologies for supporting metrology

NASA Astrophysics Data System (ADS)

Banke, Bill, Jr.; Archie, Charles N.; Sendelbach, Matthew; Robert, Jim; Slinkman, James A.; Kaszuba, Phil; Kontra, Rick; DeVries, Mick; Solecky, Eric P.

2004-05-01

Perhaps never before in semiconductor microlithography has there been such an interest in the accuracy of measurement. This interest places new demands on our in-line metrology systems as well as the supporting metrology for verification. This also puts a burden on the users and suppliers of new measurement tools, which both challenge and complement existing manufacturing metrology. The metrology community needs to respond to these challenges by using new methods to assess the fab metrologies. An important part of this assessment process is the ability to obtain accepted reference measurements as a way of determining the accuracy and Total Measurement Uncertainty (TMU) of an in-line critical dimension (CD). In this paper, CD can mean any critical dimension including, for example, such measures as feature height or sidewall angle. This paper describes the trade-offs of in-line metrology systems as well as the limitations of Reference Measurement Systems (RMS). Many factors influence each application such as feature shape, material properties, proximity, sampling, and critical dimension. These factors, along with the metrology probe size, interaction volume, and probe type such as e-beam, optical beam, and mechanical probe, are considered. As the size of features shrinks below 100nm some of the stalwarts of reference metrology come into question, such as the electrically determined transistor gate length. The concept of the RMS is expanded to show how multiple metrologies are needed to achieve the right balance of accuracy and sampling. This is also demonstrated for manufacturing metrology. Various comparisons of CDSEM, scatterometry, AFM, cross section SEM, electrically determined CDs, and TEM are shown. An example is given which demonstrates the importance in obtaining TMU by balancing accuracy and precision for selecting manufacturing measurement strategy and optimizing manufacturing metrology. It is also demonstrated how the necessary supporting metrology will

Surface Wave Metrology for Copper/Low-k Interconnects

NASA Astrophysics Data System (ADS)

Gostein, M.; Maznev, A. A.; Mazurenko, A.; Tower, J.

2005-09-01

We review recent advances in the application of laser-induced surface acoustic wave metrology to issues in copper/low-k interconnect development and manufacturing. We illustrate how the metrology technique can be used to measure copper thickness uniformity on a range of features from solid pads to arrays of lines, focusing on specific processing issues in copper electrochemical deposition (ECD) and chemical-mechanical polishing (CMP). In addition, we review recent developments in surface wave metrology for the characterization of low-k dielectric elastic modulus, including the ability to measure within-wafer uniformity of elastic modulus and to characterize porous, anisotropic films.

Aerial secure display by use of polarization-processing display with retarder film and retro-reflector

NASA Astrophysics Data System (ADS)

Ito, Shusei; Uchida, Keitaro; Mizushina, Haruki; Suyama, Shiro; Yamamoto, Hirotsugu

2017-02-01

Security is one of the big issues in automated teller machine (ATM). In ATM, two types of security have to be maintained. One is to secure displayed information. The other is to secure screen contamination. This paper gives a solution for these two security issues. In order to secure information against peeping at the screen, we utilize visual cryptography for displayed information and limit the viewing zone. Furthermore, an aerial information screen with aerial imaging by retro-reflection, named AIRR enables users to avoid direct touch on the information screen. The purpose of this paper is to propose an aerial secure display technique that ensures security of displayed information as well as security against contamination problem on screen touch. We have developed a polarization-processing display that is composed of a backlight, a polarizer, a background LCD panel, a gap, a half-wave retarder, and a foreground LCD panel. Polarization angle is rotated with the LCD panels. We have constructed a polarization encryption code set. Size of displayed images are designed to limit the viewing position. Furthermore, this polarization-processing display has been introduced into our aerial imaging optics, which employs a reflective polarizer and a retro-reflector covered with a quarter-wave retarder. Polarization-modulated light forms the real image over the reflective polarizer. We have successfully formed aerial information screen that shows the secret image with a limited viewing position. This is the first realization of aerial secure display by use of polarization-processing display with retarder-film and retro-reflector.

Metrology needs for the semiconductor industry over the next decade

NASA Astrophysics Data System (ADS)

Melliar-Smith, Mark; Diebold, Alain C.

1998-11-01

Metrology will continue to be a key enabler for the development and manufacture of future generations of integrated circuits. During 1997, the Semiconductor Industry Association renewed the National Technology Roadmap for Semiconductors (NTRS) through the 50 nm technology generation and for the first time included a Metrology Roadmap (1). Meeting the needs described in the Metrology Roadmap will be both a technological and financial challenge. In an ideal world, metrology capability would be available at the start of process and tool development, and silicon suppliers would have 450 mm wafer capable metrology tools in time for development of that wafer size. Unfortunately, a majority of the metrology suppliers are small companies that typically can't afford the additional two to three year wait for return on R&D investment. Therefore, the success of the semiconductor industry demands that we expand cooperation between NIST, SEMATECH, the National Labs, SRC, and the entire community. In this paper, we will discuss several critical metrology topics including the role of sensor-based process control, in-line microscopy, focused measurements for transistor and interconnect fabrication, and development needs. Improvements in in-line microscopy must extend existing critical dimension measurements up to 100 nm generations and new methods may be required for sub 100 nm generations. Through development, existing metrology dielectric thickness and dopant dose and junction methods can be extended to 100 nm, but new and possibly in-situ methods are needed beyond 100 nm. Interconnect process control will undergo change before 100 nm due to the introduction of copper metallization, low dielectric constant interlevel dielectrics, and Damascene process flows.

Flexible resources for quantum metrology

NASA Astrophysics Data System (ADS)

Friis, Nicolai; Orsucci, Davide; Skotiniotis, Michalis; Sekatski, Pavel; Dunjko, Vedran; Briegel, Hans J.; Dür, Wolfgang

2017-06-01

Quantum metrology offers a quadratic advantage over classical approaches to parameter estimation problems by utilising entanglement and nonclassicality. However, the hurdle of actually implementing the necessary quantum probe states and measurements, which vary drastically for different metrological scenarios, is usually not taken into account. We show that for a wide range of tasks in metrology, 2D cluster states (a particular family of states useful for measurement-based quantum computation) can serve as flexible resources that allow one to efficiently prepare any required state for sensing, and perform appropriate (entangled) measurements using only single qubit operations. Crucially, the overhead in the number of qubits is less than quadratic, thus preserving the quantum scaling advantage. This is ensured by using a compression to a logarithmically sized space that contains all relevant information for sensing. We specifically demonstrate how our method can be used to obtain optimal scaling for phase and frequency estimation in local estimation problems, as well as for the Bayesian equivalents with Gaussian priors of varying widths. Furthermore, we show that in the paradigmatic case of local phase estimation 1D cluster states are sufficient for optimal state preparation and measurement.

Metrology in electricity and magnetism: EURAMET activities today and tomorrow

NASA Astrophysics Data System (ADS)

Piquemal, F.; Jeckelmann, B.; Callegaro, L.; Hällström, J.; Janssen, T. J. B. M.; Melcher, J.; Rietveld, G.; Siegner, U.; Wright, P.; Zeier, M.

2017-10-01

Metrology dedicated to electricity and magnetism has changed considerably in recent years. It encompasses almost all modern scientific, industrial, and societal challenges, e.g. the revision of the International System of Units, the profound transformation of industry, changes in energy use and generation, health, and environment, as well as nanotechnologies (including graphene and 2D materials) and quantum engineering. Over the same period, driven by the globalization of worldwide trade, the Mutual Recognition Arrangement (referred to as the CIPM MRA) was set up. As a result, the regional metrology organizations (RMOs) of national metrology institutes have grown in significance. EURAMET is the European RMO and has been very prominent in developing a strategic research agenda (SRA) and has established a comprehensive research programme. This paper reviews the highlights of EURAMET in electrical metrology within the European Metrology Research Programme and its main contributions to the CIPM MRA. In 2012 EURAMET undertook an extensive roadmapping exercise for proposed activities for the next decade which will also be discussed in this paper. This work has resulted in a new SRA of the second largest European funding programme: European Metrology Programme for Innovation and Research.

Metrological Reliability of Medical Devices

NASA Astrophysics Data System (ADS)

Costa Monteiro, E.; Leon, L. F.

2015-02-01

The prominent development of health technologies of the 20th century triggered demands for metrological reliability of physiological measurements comprising physical, chemical and biological quantities, essential to ensure accurate and comparable results of clinical measurements. In the present work, aspects concerning metrological reliability in premarket and postmarket assessments of medical devices are discussed, pointing out challenges to be overcome. In addition, considering the social relevance of the biomeasurements results, Biometrological Principles to be pursued by research and innovation aimed at biomedical applications are proposed, along with the analysis of their contributions to guarantee the innovative health technologies compliance with the main ethical pillars of Bioethics.

A case study of comparing radiometrically calibrated reflectance of an image mosaic from unmanned aerial system with that of a single image from manned aircraft over a same area

USDA-ARS?s Scientific Manuscript database

Although conventional high-altitude airborne remote sensing and low-altitude unmanned aerial system (UAS) based remote sensing share many commonalities, one of the major differences between the two remote sensing platforms is that the latter has much smaller image footprint. To cover the same area o...

Complex Building Detection Through Integrating LIDAR and Aerial Photos

NASA Astrophysics Data System (ADS)

Zhai, R.

2015-02-01

This paper proposes a new approach on digital building detection through the integration of LiDAR data and aerial imagery. It is known that most building rooftops are represented by different regions from different seed pixels. Considering the principals of image segmentation, this paper employs a new region based technique to segment images, combining both the advantages of LiDAR and aerial images together. First, multiple seed points are selected by taking several constraints into consideration in an automated way. Then, the region growing procedures proceed by combining the elevation attribute from LiDAR data, visibility attribute from DEM (Digital Elevation Model), and radiometric attribute from warped images in the segmentation. Through this combination, the pixels with similar height, visibility, and spectral attributes are merged into one region, which are believed to represent the whole building area. The proposed methodology was implemented on real data and competitive results were achieved.

Vacuum Technology Considerations For Mass Metrology

PubMed Central

Abbott, Patrick J.; Jabour, Zeina J.

2011-01-01

Vacuum weighing of mass artifacts eliminates the necessity of air buoyancy correction and its contribution to the measurement uncertainty. Vacuum weighing is also an important process in the experiments currently underway for the redefinition of the SI mass unit, the kilogram. Creating the optimum vacuum environment for mass metrology requires careful design and selection of construction materials, plumbing components, pumping, and pressure gauging technologies. We review the vacuum technology1 required for mass metrology and suggest procedures and hardware for successful and reproducible operation. PMID:26989593

Aerial Explorers

NASA Technical Reports Server (NTRS)

Young, Larry A.; Pisanich, Greg; Ippolito, Corey

2005-01-01

This paper presents recent results from a mission architecture study of planetary aerial explorers. In this study, several mission scenarios were developed in simulation and evaluated on success in meeting mission goals. This aerial explorer mission architecture study is unique in comparison with previous Mars airplane research activities. The study examines how aerial vehicles can find and gain access to otherwise inaccessible terrain features of interest. The aerial explorer also engages in a high-level of (indirect) surface interaction, despite not typically being able to takeoff and land or to engage in multiple flights/sorties. To achieve this goal, a new mission paradigm is proposed: aerial explorers should be considered as an additional element in the overall Entry, Descent, Landing System (EDLS) process. Further, aerial vehicles should be considered primarily as carrier/utility platforms whose purpose is to deliver air-deployed sensors and robotic devices, or symbiotes, to those high-value terrain features of interest.

Theoretical study for aerial image intensity in resist in high numerical aperture projection optics and experimental verification with one-dimensional patterns

NASA Astrophysics Data System (ADS)

Shibuya, Masato; Takada, Akira; Nakashima, Toshiharu

2016-04-01

In optical lithography, high-performance exposure tools are indispensable to obtain not only fine patterns but also preciseness in pattern width. Since an accurate theoretical method is necessary to predict these values, some pioneer and valuable studies have been proposed. However, there might be some ambiguity or lack of consensus regarding the treatment of diffraction by object, incoming inclination factor onto image plane in scalar imaging theory, and paradoxical phenomenon of the inclined entrance plane wave onto image in vector imaging theory. We have reconsidered imaging theory in detail and also phenomenologically resolved the paradox. By comparing theoretical aerial image intensity with experimental pattern width for one-dimensional pattern, we have validated our theoretical consideration.

Three-dimensional digital holographic aperture synthesis for rapid and highly-accurate large-volume metrology

NASA Astrophysics Data System (ADS)

Crouch, Stephen; Kaylor, Brant M.; Barber, Zeb W.; Reibel, Randy R.

2015-09-01

Currently large volume, high accuracy three-dimensional (3D) metrology is dominated by laser trackers, which typically utilize a laser scanner and cooperative reflector to estimate points on a given surface. The dependency upon the placement of cooperative targets dramatically inhibits the speed at which metrology can be conducted. To increase speed, laser scanners or structured illumination systems can be used directly on the surface of interest. Both approaches are restricted in their axial and lateral resolution at longer stand-off distances due to the diffraction limit of the optics used. Holographic aperture ladar (HAL) and synthetic aperture ladar (SAL) can enhance the lateral resolution of an imaging system by synthesizing much larger apertures by digitally combining measurements from multiple smaller apertures. Both of these approaches only produce two-dimensional imagery and are therefore not suitable for large volume 3D metrology. We combined the SAL and HAL approaches to create a swept frequency digital holographic 3D imaging system that provides rapid measurement speed for surface coverage with unprecedented axial and lateral resolution at longer standoff ranges. The technique yields a "data cube" of Fourier domain data, which can be processed with a 3D Fourier transform to reveal a 3D estimate of the surface. In this paper, we provide the theoretical background for the technique and show experimental results based on an ultra-wideband frequency modulated continuous wave (FMCW) chirped heterodyne ranging system showing ~100 micron lateral and axial precisions at >2 m standoff distances.

Experimental Demonstration of Higher Precision Weak-Value-Based Metrology Using Power Recycling

NASA Astrophysics Data System (ADS)

Wang, Yi-Tao; Tang, Jian-Shun; Hu, Gang; Wang, Jian; Yu, Shang; Zhou, Zong-Quan; Cheng, Ze-Di; Xu, Jin-Shi; Fang, Sen-Zhi; Wu, Qing-Lin; Li, Chuan-Feng; Guo, Guang-Can

2016-12-01

The weak-value-based metrology is very promising and has attracted a lot of attention in recent years because of its remarkable ability in signal amplification. However, it is suggested that the upper limit of the precision of this metrology cannot exceed that of classical metrology because of the low sample size caused by the probe loss during postselection. Nevertheless, a recent proposal shows that this probe loss can be reduced by the power-recycling technique, and thus enhance the precision of weak-value-based metrology. Here we experimentally realize the power-recycled interferometric weak-value-based beam-deflection measurement and obtain the amplitude of the detected signal and white noise by discrete Fourier transform. Our results show that the detected signal can be strengthened by power recycling, and the power-recycled weak-value-based signal-to-noise ratio can surpass the upper limit of the classical scheme, corresponding to the shot-noise limit. This work sheds light on higher precision metrology and explores the real advantage of the weak-value-based metrology over classical metrology.

Effect of metrology time delay on overlay APC

NASA Astrophysics Data System (ADS)

Carlson, Alan; DiBiase, Debra

2002-07-01

The run-to-run control strategy of lithography APC is primarily composed of a feedback loop as shown in the diagram below. It is known that the insertion of a time delay in a feedback loop can cause degradation in control performance and could even cause a stable system to become unstable, if the time delay becomes sufficiently large. Many proponents of integrated metrology methods have cited the damage caused by metrology time delays as the primary justification for moving from a stand-alone to integrated metrology. While there is little dispute over the qualitative form of this argument, there has been very light published about the quantitative effects under real fab conditions - precisely how much control is lost due to these time delays. Another issue regarding time delays is that the length of these delays is not typically fixed - they vary from lot to lot and in some cases this variance can be large - from one hour on the short side to over 32 hours on the long side. Concern has been expressed that the variability in metrology time delays can cause undesirable dynamics in feedback loops that make it difficult to optimize feedback filters and gains and at worst could drive a system unstable. By using data from numerous fabs, spanning many sizes and styles of operation, we have conducted a quantitative study of the time delay effect on overlay run- to-run control. Our analysis resulted in the following conclusions: (1) There is a significant and material relationship between metrology time delay and overlay control under a variety of real world production conditions. (2) The run-to-run controller can be configured to minimize sensitivity to time delay variations. (3) The value of moving to integrated metrology can be quantified.

Geometric errors in 3D optical metrology systems

NASA Astrophysics Data System (ADS)

Harding, Kevin; Nafis, Chris

2008-08-01

The field of 3D optical metrology has seen significant growth in the commercial market in recent years. The methods of using structured light to obtain 3D range data is well documented in the literature, and continues to be an area of development in universities. However, the step between getting 3D data, and getting geometrically correct 3D data that can be used for metrology is not nearly as well developed. Mechanical metrology systems such as CMMs have long established standard means of verifying the geometric accuracies of their systems. Both local and volumentric measurments are characterized on such system using tooling balls, grid plates, and ball bars. This paper will explore the tools needed to characterize and calibrate an optical metrology system, and discuss the nature of the geometric errors often found in such systems, and suggest what may be a viable standard method of doing characterization of 3D optical systems. Finally, we will present a tradeoff analysis of ways to correct geometric errors in an optical systems considering what can be gained by hardware methods versus software corrections.

Joint Research on Scatterometry and AFM Wafer Metrology

NASA Astrophysics Data System (ADS)

Bodermann, Bernd; Buhr, Egbert; Danzebrink, Hans-Ulrich; Bär, Markus; Scholze, Frank; Krumrey, Michael; Wurm, Matthias; Klapetek, Petr; Hansen, Poul-Erik; Korpelainen, Virpi; van Veghel, Marijn; Yacoot, Andrew; Siitonen, Samuli; El Gawhary, Omar; Burger, Sven; Saastamoinen, Toni

2011-11-01

Supported by the European Commission and EURAMET, a consortium of 10 participants from national metrology institutes, universities and companies has started a joint research project with the aim of overcoming current challenges in optical scatterometry for traceable linewidth metrology. Both experimental and modelling methods will be enhanced and different methods will be compared with each other and with specially adapted atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurement systems in measurement comparisons. Additionally novel methods for sophisticated data analysis will be developed and investigated to reach significant reductions of the measurement uncertainties in critical dimension (CD) metrology. One final goal will be the realisation of a wafer based reference standard material for calibration of scatterometers.

Ice flood velocity calculating approach based on single view metrology

NASA Astrophysics Data System (ADS)

Wu, X.; Xu, L.

2017-02-01

Yellow River is the river in which the ice flood occurs most frequently in China, hence, the Ice flood forecasting has great significance for the river flood prevention work. In various ice flood forecast models, the flow velocity is one of the most important parameters. In spite of the great significance of the flow velocity, its acquisition heavily relies on manual observation or deriving from empirical formula. In recent years, with the high development of video surveillance technology and wireless transmission network, the Yellow River Conservancy Commission set up the ice situation monitoring system, in which live videos can be transmitted to the monitoring center through 3G mobile networks. In this paper, an approach to get the ice velocity based on single view metrology and motion tracking technique using monitoring videos as input data is proposed. First of all, River way can be approximated as a plane. On this condition, we analyze the geometry relevance between the object side and the image side. Besides, we present the principle to measure length in object side from image. Secondly, we use LK optical flow which support pyramid data to track the ice in motion. Combining the result of camera calibration and single view metrology, we propose a flow to calculate the real velocity of ice flood. At last we realize a prototype system by programming and use it to test the reliability and rationality of the whole solution.

Quantitative optical metrology with CMOS cameras

NASA Astrophysics Data System (ADS)

Furlong, Cosme; Kolenovic, Ervin; Ferguson, Curtis F.

2004-08-01

Recent advances in laser technology, optical sensing, and computer processing of data, have lead to the development of advanced quantitative optical metrology techniques for high accuracy measurements of absolute shapes and deformations of objects. These techniques provide noninvasive, remote, and full field of view information about the objects of interest. The information obtained relates to changes in shape and/or size of the objects, characterizes anomalies, and provides tools to enhance fabrication processes. Factors that influence selection and applicability of an optical technique include the required sensitivity, accuracy, and precision that are necessary for a particular application. In this paper, sensitivity, accuracy, and precision characteristics in quantitative optical metrology techniques, and specifically in optoelectronic holography (OEH) based on CMOS cameras, are discussed. Sensitivity, accuracy, and precision are investigated with the aid of National Institute of Standards and Technology (NIST) traceable gauges, demonstrating the applicability of CMOS cameras in quantitative optical metrology techniques. It is shown that the advanced nature of CMOS technology can be applied to challenging engineering applications, including the study of rapidly evolving phenomena occurring in MEMS and micromechatronics.

Metadata-assisted nonuniform atmospheric scattering model of image haze removal for medium-altitude unmanned aerial vehicle

NASA Astrophysics Data System (ADS)

Liu, Chunlei; Ding, Wenrui; Li, Hongguang; Li, Jiankun

2017-09-01

Haze removal is a nontrivial work for medium-altitude unmanned aerial vehicle (UAV) image processing because of the effects of light absorption and scattering. The challenges are attributed mainly to image distortion and detail blur during the long-distance and large-scale imaging process. In our work, a metadata-assisted nonuniform atmospheric scattering model is proposed to deal with the aforementioned problems of medium-altitude UAV. First, to better describe the real atmosphere, we propose a nonuniform atmospheric scattering model according to the aerosol distribution, which directly benefits the image distortion correction. Second, considering the characteristics of long-distance imaging, we calculate the depth map, which is an essential clue to modeling, on the basis of UAV metadata information. An accurate depth map reduces the color distortion compared with the depth of field obtained by other existing methods based on priors or assumptions. Furthermore, we use an adaptive median filter to address the problem of fuzzy details caused by the global airlight value. Experimental results on both real flight and synthetic images demonstrate that our proposed method outperforms four other existing haze removal methods.

A focal plane metrology system and PSF centroiding experiment

NASA Astrophysics Data System (ADS)

Li, Haitao; Li, Baoquan; Cao, Yang; Li, Ligang

2016-10-01

In this paper, we present an overview of a detector array equipment metrology testbed and a micro-pixel centroiding experiment currently under development at the National Space Science Center, Chinese Academy of Sciences. We discuss on-going development efforts aimed at calibrating the intra-/inter-pixel quantum efficiency and pixel positions for scientific grade CMOS detector, and review significant progress in achieving higher precision differential centroiding for pseudo star images in large area back-illuminated CMOS detector. Without calibration of pixel positions and intrapixel response, we have demonstrated that the standard deviation of differential centroiding is below 2.0e-3 pixels.

Integration of aerial oblique imagery and terrestrial imagery for optimized 3D modeling in urban areas

NASA Astrophysics Data System (ADS)

Wu, Bo; Xie, Linfu; Hu, Han; Zhu, Qing; Yau, Eric

2018-05-01

Photorealistic three-dimensional (3D) models are fundamental to the spatial data infrastructure of a digital city, and have numerous potential applications in areas such as urban planning, urban management, urban monitoring, and urban environmental studies. Recent developments in aerial oblique photogrammetry based on aircraft or unmanned aerial vehicles (UAVs) offer promising techniques for 3D modeling. However, 3D models generated from aerial oblique imagery in urban areas with densely distributed high-rise buildings may show geometric defects and blurred textures, especially on building façades, due to problems such as occlusion and large camera tilt angles. Meanwhile, mobile mapping systems (MMSs) can capture terrestrial images of close-range objects from a complementary view on the ground at a high level of detail, but do not offer full coverage. The integration of aerial oblique imagery with terrestrial imagery offers promising opportunities to optimize 3D modeling in urban areas. This paper presents a novel method of integrating these two image types through automatic feature matching and combined bundle adjustment between them, and based on the integrated results to optimize the geometry and texture of the 3D models generated from aerial oblique imagery. Experimental analyses were conducted on two datasets of aerial and terrestrial images collected in Dortmund, Germany and in Hong Kong. The results indicate that the proposed approach effectively integrates images from the two platforms and thereby improves 3D modeling in urban areas.

Oblique Aerial Photography Tool for Building Inspection and Damage Assessment

NASA Astrophysics Data System (ADS)

Murtiyoso, A.; Remondino, F.; Rupnik, E.; Nex, F.; Grussenmeyer, P.

2014-11-01

Aerial photography has a long history of being employed for mapping purposes due to some of its main advantages, including large area imaging from above and minimization of field work. Since few years multi-camera aerial systems are becoming a practical sensor technology across a growing geospatial market, as complementary to the traditional vertical views. Multi-camera aerial systems capture not only the conventional nadir views, but also tilted images at the same time. In this paper, a particular use of such imagery in the field of building inspection as well as disaster assessment is addressed. The main idea is to inspect a building from four cardinal directions by using monoplotting functionalities. The developed application allows to measure building height and distances and to digitize man-made structures, creating 3D surfaces and building models. The realized GUI is capable of identifying a building from several oblique points of views, as well as calculates the approximate height of buildings, ground distances and basic vectorization. The geometric accuracy of the results remains a function of several parameters, namely image resolution, quality of available parameters (DEM, calibration and orientation values), user expertise and measuring capability.

Range-Gated Metrology: An Ultra-Compact Sensor for Dimensional Stabilization

NASA Technical Reports Server (NTRS)

Lay, Oliver P.; Dubovitsky, Serge; Shaddock, Daniel A.; Ware, Brent; Woodruff, Christopher S.

2008-01-01

Point-to-point laser metrology systems can be used to stabilize large structures at the nanometer levels required for precision optical systems. Existing sensors are large and intrusive, however, with optical heads that consist of several optical elements and require multiple optical fiber connections. The use of point-to-point laser metrology has therefore been limited to applications where only a few gauges are needed and there is sufficient space to accommodate them. Range-Gated Metrology is a signal processing technique that preserves nanometer-level or better performance while enabling: (1) a greatly simplified optical head - a single fiber optic collimator - that can be made very compact, and (2) a single optical fiber connection that is readily multiplexed. This combination of features means that it will be straightforward and cost-effective to embed tens or hundreds of compact metrology gauges to stabilize a large structure. In this paper we describe the concept behind Range-Gated Metrology, demonstrate the performance in a laboratory environment, and give examples of how such a sensor system might be deployed.

Aerial LED signage by use of crossed-mirror array

NASA Astrophysics Data System (ADS)

Yamamoto, Hirotsugu; Kujime, Ryousuke; Bando, Hiroki; Suyama, Shiro

2013-03-01

3D representation of digital signage improves its significance and rapid notification of important points. Real 3D display techniques such as volumetric 3D displays are effective for use of 3D for public signs because it provides not only binocular disparity but also motion parallax and other cues, which will give 3D impression even people with abnormal binocular vision. Our goal is to realize aerial 3D LED signs. We have specially designed and fabricated a reflective optical device to form an aerial image of LEDs with a wide field angle. The developed reflective optical device composed of crossed-mirror array (CMA). CMA contains dihedral corner reflectors at each aperture. After double reflection, light rays emitted from an LED will converge into the corresponding image point. The depth between LED lamps is represented in the same depth in the floating 3D image. Floating image of LEDs was formed in wide range of incident angle with a peak reflectance at 35 deg. The image size of focused beam (point spread function) agreed to the apparent aperture size.

Generic distortion model for metrology under optical microscopes

NASA Astrophysics Data System (ADS)

Liu, Xingjian; Li, Zhongwei; Zhong, Kai; Chao, YuhJin; Miraldo, Pedro; Shi, Yusheng

2018-04-01

For metrology under optical microscopes, lens distortion is the dominant source of error. Previous distortion models and correction methods mostly rely on the assumption that parametric distortion models require a priori knowledge of the microscopes' lens systems. However, because of the numerous optical elements in a microscope, distortions can be hardly represented by a simple parametric model. In this paper, a generic distortion model considering both symmetric and asymmetric distortions is developed. Such a model is obtained by using radial basis functions (RBFs) to interpolate the radius and distortion values of symmetric distortions (image coordinates and distortion rays for asymmetric distortions). An accurate and easy to implement distortion correction method is presented. With the proposed approach, quantitative measurement with better accuracy can be achieved, such as in Digital Image Correlation for deformation measurement when used with an optical microscope. The proposed technique is verified by both synthetic and real data experiments.

High-NA metrology and sensing on Berkeley MET5

NASA Astrophysics Data System (ADS)

Miyakawa, Ryan; Anderson, Chris; Naulleau, Patrick

2017-03-01

In this paper we compare two non-interferometric wavefront sensors suitable for in-situ high-NA EUV optical testing. The first is the AIS sensor, which has been deployed in both inspection and exposure tools. AIS is a compact, optical test that directly measures a wavefront by probing various parts of the imaging optic pupil and measuring localized wavefront curvature. The second is an image-based technique that uses an iterative algorithm based on simulated annealing to reconstruct a wavefront based on matching aerial images through focus. In this technique, customized illumination is used to probe the pupil at specific points to optimize differences in aberration signatures.

Using aerial images for establishing a workflow for the quantification of water management measures

NASA Astrophysics Data System (ADS)

Leuschner, Annette; Merz, Christoph; van Gasselt, Stephan; Steidl, Jörg

2017-04-01

Quantified landscape characteristics, such as morphology, land use or hydrological conditions, play an important role for hydrological investigations as landscape parameters directly control the overall water balance. A powerful assimilation and geospatial analysis of remote sensing datasets in combination with hydrological modeling allows to quantify landscape parameters and water balances efficiently. This study focuses on the development of a workflow to extract hydrologically relevant data from aerial image datasets and derived products in order to allow an effective parametrization of a hydrological model. Consistent and self-contained data source are indispensable for achieving reasonable modeling results. In order to minimize uncertainties and inconsistencies, input parameters for modeling should be extracted from one remote-sensing dataset mainly if possbile. Here, aerial images have been chosen because of their high spatial and spectral resolution that permits the extraction of various model relevant parameters, like morphology, land-use or artificial drainage-systems. The methodological repertoire to extract environmental parameters range from analyses of digital terrain models, multispectral classification and segmentation of land use distribution maps and mapping of artificial drainage-systems based on spectral and visual inspection. The workflow has been tested for a mesoscale catchment area which forms a characteristic hydrological system of a young moraine landscape located in the state of Brandenburg, Germany. These dataset were used as input-dataset for multi-temporal hydrological modelling of water balances to detect and quantify anthropogenic and meteorological impacts. ArcSWAT, as a GIS-implemented extension and graphical user input interface for the Soil Water Assessment Tool (SWAT) was chosen. The results of this modeling approach provide the basis for anticipating future development of the hydrological system, and regarding system changes for

Hybrid enabled thin film metrology using XPS and optical

NASA Astrophysics Data System (ADS)

Vaid, Alok; Iddawela, Givantha; Mahendrakar, Sridhar; Lenahan, Michael; Hossain, Mainul; Timoney, Padraig; Bello, Abner F.; Bozdog, Cornel; Pois, Heath; Lee, Wei Ti; Klare, Mark; Kwan, Michael; Kang, Byung Cheol; Isbester, Paul; Sendelbach, Matthew; Yellai, Naren; Dasari, Prasad; Larson, Tom

2016-03-01

Complexity of process steps integration and material systems for next-generation technology nodes is reaching unprecedented levels, the appetite for higher sampling rates is on the rise, while the process window continues to shrink. Current thickness metrology specifications reach as low as 0.1A for total error budget - breathing new life into an old paradigm with lower visibility for past few metrology nodes: accuracy. Furthermore, for advance nodes there is growing demand to measure film thickness and composition on devices/product instead of surrogate planar simpler pads. Here we extend our earlier work in Hybrid Metrology to the combination of X-Ray based reference technologies (high performance) with optical high volume manufacturing (HVM) workhorse metrology (high throughput). Our stated goal is: put more "eyes" on the wafer (higher sampling) and enable move to films on pattern structure (control what matters). Examples of 1X front-end applications are used to setup and validate the benefits.

Digital terrain modeling and industrial surface metrology: Converging realms

USGS Publications Warehouse

Pike, R.J.

2001-01-01

Digital terrain modeling has a micro-and nanoscale counterpart in surface metrology, the numerical characterization of industrial surfaces. Instrumentation in semiconductor manufacturing and other high-technology fields can now contour surface irregularities down to the atomic scale. Surface metrology has been revolutionized by its ability to manipulate square-grid height matrices that are analogous to the digital elevation models (DEMs) used in physical geography. Because the shaping of industrial surfaces is a spatial process, the same concepts of analytical cartography that represent ground-surface form in geography evolved independently in metrology: The surface topography of manufactured components, exemplified here by automobile-engine cylinders, is routinely modeled by variogram analysis, relief shading, and most other techniques of parameterization and visualization familiar to geography. This article introduces industrial surface-metrology, examines the field in the context of terrain modeling and geomorphology and notes their similarities and differences, and raises theoretical issues to be addressed in progressing toward a unified practice of surface morphometry.

NASA Metrology and Calibration, 1980

NASA Technical Reports Server (NTRS)

1981-01-01

The proceedings of the fourth annual NASA Metrology and Calibration Workshop are presented. This workshop covered (1) review and assessment of NASA metrology and calibration activities by NASA Headquarters, (2) results of audits by the Office of Inspector General, (3) review of a proposed NASA Equipment Management System, (4) current and planned field center activities, (5) National Bureau of Standards (NBS) calibration services for NASA, (6) review of NBS's Precision Measurement and Test Equipment Project activities, (7) NASA instrument loan pool operations at two centers, (8) mobile cart calibration systems at two centers, (9) calibration intervals and decals, (10) NASA Calibration Capabilities Catalog, and (11) development of plans and objectives for FY 1981. Several papers in this proceedings are slide presentations only.

FOREWORD: Special issue on radionuclide metrology

NASA Astrophysics Data System (ADS)

Simpson, Bruce; Judge, Steven

2007-08-01

This special issue of Metrologia on radionuclide metrology is the first of a trilogy on the subject of ionizing radiation measurement, a field that is overseen by Sections I, II and III of the CIPM's Consultative Committee for Ionizing Radiation (CCRI). The idea was first proposed at the 2003 series of CCRI Section meetings, with the general aim of showcasing the relevance and importance of metrology in ionizing radiation to a broader metrological audience. After the 2005 meeting of Section II (measurement of radionuclides), the radioactivity aspect of the project began to move forward in earnest. A working group was set up with the brief that the special issue should be of use by experienced metrologists as an overview of the 'state of the art' to compare progress and scientific content with those in other fields of metrology, as a resource for new metrologists joining the field and as a guide for users of radioactivity to explain how traceability to the international measurement system may be achieved. Since mankind first became aware of the existence of radioactivity just over a century ago (due to its discovery by Becquerel and further work by the Curies), much has been learnt and understood in the interim period. The field of radionuclide metrology that developed subsequently is broad-based and encompasses, amongst others, nuclear physics (experimental and theory), chemistry, mathematics, mathematical statistics, uncertainty analysis and advanced computing for data analysis, simulation and modelling. To determine the activity of radionuclides accurately requires elements of all of these subjects. In more recent decades the focus has been on the practical applications of radioactivity in industry and the health field in particular. In addition, low-level environmental radioactivity monitoring has taken on ever greater importance in the nuclear power era. These developments have required new detection instrumentation and techniques on an ongoing basis to ensure

DLP-based 3D metrology by structured light or projected fringe technology for life sciences and industrial metrology

NASA Astrophysics Data System (ADS)

Frankowski, G.; Hainich, R.

2009-02-01

Since the mid-eighties, a fundamental idea for achieving measuring accuracy in projected fringe technology was to consider the projected fringe pattern as an interferogram and evaluate it on the basis of advanced algorithms widely used for phase measuring in real-time interferometry. A fundamental requirement for obtaining a sufficiently high degree of measuring accuracy with this so-called "phase measuring projected fringe technology" is that the projected fringes, analogous to interference fringes, must have a cos2-shaped intensity distribution. Until the mid-nineties, this requirement for the projected fringe pattern measurement technology presented a basic handicap for its wide application in 3D metrology. This situation changed abruptly, when in the nineties Texas Instruments introduced to the market advanced digital light projection on the basis of micro mirror based projection systems, socalled DLP technology, which also facilitated the generation and projection of cos2-shaped intensity and/or fringe patterns. With this DLP technology, which from its original approach was actually oriented towards completely different applications such as multimedia projection, Texas Instruments boosted phase-measuring fringe projection in optical 3D metrology to a worldwide breakthrough both for medical as well as industrial applications. A subject matter of the lecture will be to present the fundamental principles and the resulting advantages of optical 3D metrology based on phase-measuring fringe projection using DLP technology. Further will be presented and discussed applications of the measurement technology in medical engineering and industrial metrology.

Automatic Feature Detection, Description and Matching from Mobile Laser Scanning Data and Aerial Imagery

NASA Astrophysics Data System (ADS)

Hussnain, Zille; Oude Elberink, Sander; Vosselman, George

2016-06-01

In mobile laser scanning systems, the platform's position is measured by GNSS and IMU, which is often not reliable in urban areas. Consequently, derived Mobile Laser Scanning Point Cloud (MLSPC) lacks expected positioning reliability and accuracy. Many of the current solutions are either semi-automatic or unable to achieve pixel level accuracy. We propose an automatic feature extraction method which involves utilizing corresponding aerial images as a reference data set. The proposed method comprise three steps; image feature detection, description and matching between corresponding patches of nadir aerial and MLSPC ortho images. In the data pre-processing step the MLSPC is patch-wise cropped and converted to ortho images. Furthermore, each aerial image patch covering the area of the corresponding MLSPC patch is also cropped from the aerial image. For feature detection, we implemented an adaptive variant of Harris-operator to automatically detect corner feature points on the vertices of road markings. In feature description phase, we used the LATCH binary descriptor, which is robust to data from different sensors. For descriptor matching, we developed an outlier filtering technique, which exploits the arrangements of relative Euclidean-distances and angles between corresponding sets of feature points. We found that the positioning accuracy of the computed correspondence has achieved the pixel level accuracy, where the image resolution is 12cm. Furthermore, the developed approach is reliable when enough road markings are available in the data sets. We conclude that, in urban areas, the developed approach can reliably extract features necessary to improve the MLSPC accuracy to pixel level.

IT Security Standards and Legal Metrology - Transfer and Validation

NASA Astrophysics Data System (ADS)

Thiel, F.; Hartmann, V.; Grottker, U.; Richter, D.

2014-08-01

Legal Metrology's requirements can be transferred into the IT security domain applying a generic set of standardized rules provided by the Common Criteria (ISO/IEC 15408). We will outline the transfer and cross validation of such an approach. As an example serves the integration of Legal Metrology's requirements into a recently developed Common Criteria based Protection Profile for a Smart Meter Gateway designed under the leadership of the Germany's Federal Office for Information Security. The requirements on utility meters laid down in the Measuring Instruments Directive (MID) are incorporated. A verification approach to check for meeting Legal Metrology's requirements by their interpretation through Common Criteria's generic requirements is also presented.

Advanced Tie Feature Matching for the Registration of Mobile Mapping Imaging Data and Aerial Imagery

NASA Astrophysics Data System (ADS)

Jende, P.; Peter, M.; Gerke, M.; Vosselman, G.

2016-06-01

Mobile Mapping's ability to acquire high-resolution ground data is opposing unreliable localisation capabilities of satellite-based positioning systems in urban areas. Buildings shape canyons impeding a direct line-of-sight to navigation satellites resulting in a deficiency to accurately estimate the mobile platform's position. Consequently, acquired data products' positioning quality is considerably diminished. This issue has been widely addressed in the literature and research projects. However, a consistent compliance of sub-decimetre accuracy as well as a correction of errors in height remain unsolved. We propose a novel approach to enhance Mobile Mapping (MM) image orientation based on the utilisation of highly accurate orientation parameters derived from aerial imagery. In addition to that, the diminished exterior orientation parameters of the MM platform will be utilised as they enable the application of accurate matching techniques needed to derive reliable tie information. This tie information will then be used within an adjustment solution to correct affected MM data. This paper presents an advanced feature matching procedure as a prerequisite to the aforementioned orientation update. MM data is ortho-projected to gain a higher resemblance to aerial nadir data simplifying the images' geometry for matching. By utilising MM exterior orientation parameters, search windows may be used in conjunction with a selective keypoint detection and template matching. Originating from different sensor systems, however, difficulties arise with respect to changes in illumination, radiometry and a different original perspective. To respond to these challenges for feature detection, the procedure relies on detecting keypoints in only one image. Initial tests indicate a considerable improvement in comparison to classic detector/descriptor approaches in this particular matching scenario. This method leads to a significant reduction of outliers due to the limited availability

Cadastral Audit and Assessments Using Unmanned Aerial Systems

NASA Astrophysics Data System (ADS)

Cunningham, K.; Walker, G.; Stahlke, E.; Wilson, R.

2011-09-01

Ground surveys and remote sensing are integral to establishing fair and equitable property valuations necessary for real property taxation. The International Association of Assessing Officers (IAAO) has embraced aerial and street-view imaging as part of its standards related to property tax assessments and audits. New technologies, including unmanned aerial systems (UAS) paired with imaging sensors, will become more common as local governments work to ensure their cadastre and tax rolls are both accurate and complete. Trends in mapping technology have seen an evolution in platforms from large, expensive manned aircraft to very small, inexpensive UAS. Traditional methods of photogrammetry have also given way to new equipment and sensors: digital cameras, infrared imagers, light detection and ranging (LiDAR) laser scanners, and now synthetic aperture radar (SAR). At the University of Alaska Fairbanks (UAF), we work extensively with unmanned aerial systems equipped with each of these newer sensors. UAF has significant experience flying unmanned systems in the US National Airspace, having begun in 1969 with scientific rockets and expanded to unmanned aircraft in 2003. Ongoing field experience allows UAF to partner effectively with outside organizations to test and develop leading-edge research in UAS and remote sensing. This presentation will discuss our research related to various sensors and payloads for mapping. We will also share our experience with UAS and optical systems for creating some of the first cadastral surveys in rural Alaska.

PREFACE: 3rd International Congress on Mechanical Metrology (CIMMEC2014)

NASA Astrophysics Data System (ADS)

2015-10-01

From October 14th to 16th 2014, The Brazilian National Institute of Metrology, Quality, and Technology (Inmetro) and the Brazilian Society of Metrology (SBM) organized the 3rd International Congress on Mechanical Metrology (3rd CIMMEC). The 3rd CIMMEC was held in the city of Gramado, Rio Grande do Sul, Brazil. Anticipating the interest and enthusiasm of the technical-scientific community, the Organizing Institutions invite people and organizations to participate in this important congress, reiterating the commitment to organize an event according to highest international standards. This event has been conceived to integrate people and organizations from Brazil and abroad in the discussion of advanced themes in metrology. Manufacturers and dealers of measuring equipment and standards, as well as of auxiliary accessories and bibliographic material, had the chance to promote their products and services in stands at the Fair, which has taken place alongside the Congress. The 3rd CIMMEC consisted of five Keynote Speeches and 116 regular papers. Among the regular papers, the 25 most outstanding ones, comprising a high quality content on Mechanical Metrology, were selected to be published in this issue of Journal of Physics: Conference Series. It is our great pleasure to present this volume of Journal of Physics: Conference Series to the scientific community to promote further research in Mechanical Metrology and related areas. We believe that this volume will be both an excellent source of scientific material in the fast evolving fields that were covered by CIMMEC 2014.

The Development of a Deflectometer for Accurate Surface Figure Metrology

NASA Technical Reports Server (NTRS)

Gubarev, Mikhail; Eberhardt, Andrew; Ramsey, Brian; Atkins, Carolyn

2015-01-01

Marshall Space Flight Center is developing the method of direct fabrication for high resolution full-shell x-ray optics. In this technique the x-ray optics axial profiles are figured and polished using a computer-controlled ZeekoIRP600X polishing machine. Based on the Chandra optics fabrication history about one third of the manufacturing time is spent on moving a mirror between fabrication and metrology sites, reinstallation and alignment with either the metrology or fabrication instruments. Also, the accuracy of the alignment significantly affects the ultimate accuracy of the resulting mirrors. In order to achieve higher convergence rate it is highly desirable to have a metrology technique capable of in situ surface figure measurements of the optics under fabrication, so the overall fabrication costs would be greatly reduced while removing the surface errors due to the re-alignment necessary after each metrology cycle during the fabrication. The goal of this feasibility study is to demonstrate if the Phase Measuring Deflectometry can be applied for in situ metrology of full shell x-ray optics. Examples of the full-shell mirror substrates suitable for the direct fabrication

Unmanned aerial vehicles (UAVs) for surveying marine fauna: a dugong case study.

PubMed

Hodgson, Amanda; Kelly, Natalie; Peel, David

2013-01-01

Aerial surveys of marine mammals are routinely conducted to assess and monitor species' habitat use and population status. In Australia, dugongs (Dugong dugon) are regularly surveyed and long-term datasets have formed the basis for defining habitat of high conservation value and risk assessments of human impacts. Unmanned aerial vehicles (UAVs) may facilitate more accurate, human-risk free, and cheaper aerial surveys. We undertook the first Australian UAV survey trial in Shark Bay, western Australia. We conducted seven flights of the ScanEagle UAV, mounted with a digital SLR camera payload. During each flight, ten transects covering a 1.3 km(2) area frequently used by dugongs, were flown at 500, 750 and 1000 ft. Image (photograph) capture was controlled via the Ground Control Station and the capture rate was scheduled to achieve a prescribed 10% overlap between images along transect lines. Images were manually reviewed post hoc for animals and scored according to sun glitter, Beaufort Sea state and turbidity. We captured 6243 images, 627 containing dugongs. We also identified whales, dolphins, turtles and a range of other fauna. Of all possible dugong sightings, 95% (CI = 90%, 98%) were subjectively classed as 'certain' (unmistakably dugongs). Neither our dugong sighting rate, nor our ability to identify dugongs with certainty, were affected by UAV altitude. Turbidity was the only environmental variable significantly affecting the dugong sighting rate. Our results suggest that UAV systems may not be limited by sea state conditions in the same manner as sightings from manned surveys. The overlap between images proved valuable for detecting animals that were masked by sun glitter in the corners of images, and identifying animals initially captured at awkward body angles. This initial trial of a basic camera system has successfully demonstrated that the ScanEagle UAV has great potential as a tool for marine mammal aerial surveys.

Unmanned Aerial Vehicles (UAVs) for Surveying Marine Fauna: A Dugong Case Study

PubMed Central

Hodgson, Amanda; Kelly, Natalie; Peel, David

2013-01-01

Aerial surveys of marine mammals are routinely conducted to assess and monitor species’ habitat use and population status. In Australia, dugongs (Dugong dugon) are regularly surveyed and long-term datasets have formed the basis for defining habitat of high conservation value and risk assessments of human impacts. Unmanned aerial vehicles (UAVs) may facilitate more accurate, human-risk free, and cheaper aerial surveys. We undertook the first Australian UAV survey trial in Shark Bay, western Australia. We conducted seven flights of the ScanEagle UAV, mounted with a digital SLR camera payload. During each flight, ten transects covering a 1.3 km2 area frequently used by dugongs, were flown at 500, 750 and 1000 ft. Image (photograph) capture was controlled via the Ground Control Station and the capture rate was scheduled to achieve a prescribed 10% overlap between images along transect lines. Images were manually reviewed post hoc for animals and scored according to sun glitter, Beaufort Sea state and turbidity. We captured 6243 images, 627 containing dugongs. We also identified whales, dolphins, turtles and a range of other fauna. Of all possible dugong sightings, 95% (CI = 90%, 98%) were subjectively classed as ‘certain’ (unmistakably dugongs). Neither our dugong sighting rate, nor our ability to identify dugongs with certainty, were affected by UAV altitude. Turbidity was the only environmental variable significantly affecting the dugong sighting rate. Our results suggest that UAV systems may not be limited by sea state conditions in the same manner as sightings from manned surveys. The overlap between images proved valuable for detecting animals that were masked by sun glitter in the corners of images, and identifying animals initially captured at awkward body angles. This initial trial of a basic camera system has successfully demonstrated that the ScanEagle UAV has great potential as a tool for marine mammal aerial surveys. PMID:24223967

Assessing Long-Term Seagrass Changes by Integrating a High-Spatial Resolution Image, Historical Aerial Photography and Field Data

NASA Astrophysics Data System (ADS)

Leon-Perez, M.; Hernandez, W. J.; Armstrong, R.

2016-02-01

Reported cases of seagrass loss have increased over the last 40 years, increasing the awareness of the need for assessing seagrass health. In situ monitoring has been the main method to assess spatial and temporal changes in seagrass ecosystem. Although remote sensing techniques with multispectral imagery have been recently used for these purposes, long-term analysis is limited to the sensor's mission life. The objective of this project is to determine long-term changes in seagrass habitat cover at Caja de Muertos Island Nature Reserve, by combining in situ data with a satellite image and historical aerial photography. A current satellite imagery of the WorldView-2 sensor was used to generate a 2014 benthic habitat map for the study area. The multispectral image was pre-processed using: conversion of digital numbers to radiance, and atmospheric and water column corrections. Object-based image analysis was used to segment the image into polygons representing different benthic habitats and to classify those habitats according to the classification scheme developed for this project. The scheme include the following benthic habitat categories: seagrass (sparse, dense and very dense), colonized hard bottom (sparse, dense and very dense), sand and mix algae on unconsolidated sediments. Field work was used to calibrate the satellite-derived benthic maps and to asses accuracy of the final products. In addition, a time series of satellite imagery and historic aerial photography from 1950 to 2014 provided data to assess long-term changes in seagrass habitat cover within the Reserve. Preliminary results show an increase in seagrass habitat cover, contrasting with the worldwide declining trend. The results of this study will provide valuable information for the conservation and management of seagrass habitat in the Caja de Muertos Island Nature Reserve.

Advanced applications of scatterometry based optical metrology

NASA Astrophysics Data System (ADS)

Dixit, Dhairya; Keller, Nick; Kagalwala, Taher; Recchia, Fiona; Lifshitz, Yevgeny; Elia, Alexander; Todi, Vinit; Fronheiser, Jody; Vaid, Alok

2017-03-01

The semiconductor industry continues to drive patterning solutions that enable devices with higher memory storage capacity, faster computing performance, and lower cost per transistor. These developments in the field of semiconductor manufacturing along with the overall minimization of the size of transistors require continuous development of metrology tools used for characterization of these complex 3D device architectures. Optical scatterometry or optical critical dimension (OCD) is one of the most prevalent inline metrology techniques in semiconductor manufacturing because it is a quick, precise and non-destructive metrology technique. However, at present OCD is predominantly used to measure the feature dimensions such as line-width, height, side-wall angle, etc. of the patterned nano structures. Use of optical scatterometry for characterizing defects such as pitch-walking, overlay, line edge roughness, etc. is fairly limited. Inspection of process induced abnormalities is a fundamental part of process yield improvement. It provides process engineers with important information about process errors, and consequently helps optimize materials and process parameters. Scatterometry is an averaging technique and extending it to measure the position of local process induced defectivity and feature-to-feature variation is extremely challenging. This report is an overview of applications and benefits of using optical scatterometry for characterizing defects such as pitch-walking, overlay and fin bending for advanced technology nodes beyond 7nm. Currently, the optical scatterometry is based on conventional spectroscopic ellipsometry and spectroscopic reflectometry measurements, but generalized ellipsometry or Mueller matrix spectroscopic ellipsometry data provides important, additional information about complex structures that exhibit anisotropy and depolarization effects. In addition the symmetry-antisymmetry properties associated with Mueller matrix (MM) elements

Search for general relativistic effects in table-top displacement metrology

NASA Technical Reports Server (NTRS)

Halverson, Peter G.; Macdonald, Daniel R.; Diaz, Rosemary T.

2004-01-01

As displacement metrology accuracy improves, general relativistic effects will become noticeable. Metrology gauges developed for the Space Interferometry Mission were used to search for locally anisotropic space-time, with a null result at the 10 to the negative tenth power level.

On the evaluation of photogrammetric methods for dense 3D surface reconstruction in a metrological context

NASA Astrophysics Data System (ADS)

Toschi, I.; Capra, A.; De Luca, L.; Beraldin, J.-A.; Cournoyer, L.

2014-05-01

This paper discusses a methodology to evaluate the accuracy of recently developed image-based 3D modelling techniques. So far, the emergence of these novel methods has not been supported by the definition of an internationally recognized standard which is fundamental for user confidence and market growth. In order to provide an element of reflection and solution to the different communities involved in 3D imaging, a promising approach is presented in this paper for the assessment of both metric quality and limitations of an open-source suite of tools (Apero/MicMac), developed for the extraction of dense 3D point clouds from a set of unordered 2D images. The proposed procedural workflow is performed within a metrological context, through inter-comparisons with "reference" data acquired with two hemispherical laser scanners, one total station, and one laser tracker. The methodology is applied to two case studies, designed in order to analyse the software performances in dealing with both outdoor and environmentally controlled conditions, i.e. the main entrance of Cathédrale de la Major (Marseille, France) and a custom-made scene located at National Research Council of Canada 3D imaging Metrology Laboratory (Ottawa). Comparative data and accuracy evidence produced for both tests allow the study of some key factors affecting 3D model accuracy.

PREFACE: 13th International Conference on Metrology and Properties of Engineering Surfaces

NASA Astrophysics Data System (ADS)

Leach, Richard

2011-08-01

The 13th International Conference on Metrology and Properties of Engineering Surfaces focused on the progress in surface metrology, surface characterisation instrumentation and properties of engineering surfaces. The conference provided an international forum for academics, industrialists and engineers from different disciplines to meet and exchange their ideas, results and latest research. The conference was held at Twickenham Stadium, situated approximately six miles from Heathrow Airport and approximately three miles from the National Physical Laboratory (NPL). This was the thirteenth in the very successful series of conferences, which have firmly established surface topography as a new and exciting interdisciplinary field of scientific and technological studies. Scientific Themes: Surface, Micro and Nano Metrology Measurement and Instrumentation Metrology for MST Devices Freeform Surface Measurement and Characterisation Uncertainty, Traceability and Calibration AFM/SPM Metrology Tribology and Wear Phenomena Functional Applications Stylus and Optical Instruments

Laser metrology and optic active control system for GAIA

NASA Astrophysics Data System (ADS)

D'Angelo, F.; Bonino, L.; Cesare, S.; Castorina, G.; Mottini, S.; Bertinetto, F.; Bisi, M.; Canuto, E.; Musso, F.

2017-11-01

The Laser Metrology and Optic Active Control (LM&OAC) program has been carried out under ESA contract with the purpose to design and validate a laser metrology system and an actuation mechanism to monitor and control at microarcsec level the stability of the Basic Angle (angle between the lines of sight of the two telescopes) of GAIA satellite. As part of the program, a breadboard (including some EQM elements) of the laser metrology and control system has been built and submitted to functional, performance and environmental tests. In the followings we describe the mission requirements, the system architecture, the breadboard design, and finally the performed validation tests. Conclusion and appraisals from this experience are also reported.

Unmanned Aerial Systems and Spectroscopy for Remote Sensing Applications in Archaeology

NASA Astrophysics Data System (ADS)

Themistocleous, K.; Agapiou, A.; Cuca, B.; Hadjimitsis, D. G.

2015-04-01

Remote sensing has open up new dimensions in archaeological research. Although there has been significant progress in increasing the resolution of space/aerial sensors and image processing, the detection of the crop (and soil marks) formations, which relate to buried archaeological remains, are difficult to detect since these marks may not be visible in the images if observed over different period or at different spatial/spectral resolution. In order to support the improvement of earth observation remote sensing technologies specifically targeting archaeological research, a better understanding of the crop/soil marks formation needs to be studied in detail. In this paper the contribution of both Unmanned Aerial Systems as well ground spectroradiometers is discussed in a variety of examples applied in the eastern Mediterranean region (Cyprus and Greece) as well in Central Europe (Hungary). In- situ spectroradiometric campaigns can be applied for the removal of atmospheric impact to simultaneous satellite overpass images. In addition, as shown in this paper, the systematic collection of ground truth data prior to the satellite/aerial acquisition can be used to detect the optimum temporal and spectral resolution for the detection of stress vegetation related to buried archaeological remains. Moreover, phenological studies of the crops from the area of interest can be simulated to the potential sensors based on their Relative Response Filters and therefore prepare better the satellite-aerial campaigns. Ground data and the use of Unmanned Aerial Systems (UAS) can provide an increased insight for studying the formation of crop and soil marks. New algorithms such as vegetation indices and linear orthogonal equations for the enhancement of crop marks can be developed based on the specific spectral characteristics of the area. As well, UAS can be used for remote sensing applications in order to document, survey and model cultural heritage and archaeological sites.

Search for general relativistic effects in table-top displacement metrology

NASA Technical Reports Server (NTRS)

Halverson, Peter G.; Diaz, Rosemary T.; Macdonald, Daniel R.

2004-01-01

As displacement metrology accuracy improves, general relativistic effects will become noticeable. Metrology gauges developed for the Space Interferometry Mission, were used to search for locally anisotropic space-time, with a null result at the 10 to the negative 10th power level.

Solving next generation (1x node) metrology challenges using advanced CDSEM capabilities: tilt, high energy and backscatter imaging

NASA Astrophysics Data System (ADS)

Zhang, Xiaoxiao; Snow, Patrick W.; Vaid, Alok; Solecky, Eric; Zhou, Hua; Ge, Zhenhua; Yasharzade, Shay; Shoval, Ori; Adan, Ofer; Schwarzband, Ishai; Bar-Zvi, Maayan

2015-03-01

Traditional metrology solutions are facing a range of challenges at the 1X node such as three dimensional (3D) measurement capabilities, shrinking overlay and critical dimension (CD) error budgets driven by multi-patterning and via in trench CD measurements. Hybrid metrology offers promising new capabilities to address some of these challenges but it will take some time before fully realized. This paper explores new capabilities currently offered on the in-line Critical Dimension Scanning Electron Microscope (CD-SEM) to address these challenges and enable the CD-SEM to move beyond measuring bottom CD using top down imaging. Device performance is strongly correlated with Fin geometry causing an urgent need for 3D measurements. New beam tilting capabilities enhance the ability to make 3D measurements in the front-end-of-line (FEOL) of the metal gate FinFET process in manufacturing. We explore these new capabilities for measuring Fin height and build upon the work communicated last year at SPIE1. Furthermore, we extend the application of the tilt beam to the back-end-of-line (BEOL) trench depth measurement and demonstrate its capability in production targeting replacement of the existing Atomic Force Microscope (AFM) measurements by including the height measurement in the existing CDSEM recipe to reduce fab cycle time. In the BEOL, another increasingly challenging measurement for the traditional CD-SEM is the bottom CD of the self-aligned via (SAV) in a trench first via last (TFVL) process. Due to the extremely high aspect ratio of the structure secondary electron (SE) collection from the via bottom is significantly reduced requiring the use of backscatter electrons (BSE) to increase the relevant image quality. Even with this solution, the resulting images are difficult to measure with advanced technology nodes. We explore new methods to increase measurement robustness and combine this with novel segmentation-based measurement algorithm generated specifically for BSE

Use of Aerial Hyperspectral Imaging For Monitoring Forest Health

Treesearch

Milton O. Smith; Nolan J. Hess; Stephen Gulick; Lori G. Eckhardt; Roger D. Menard

2004-01-01

This project evaluates the effectiveness of aerial hyperspectral digital imagery in the assessment of forest health of loblolly stands in central Alabama. The imagery covers 50 square miles, in Bibb and Hale Counties, south of Tuscaloosa, AL, which includes intensive managed forest industry sites and National Forest lands with multiple use objectives. Loblolly stands...

[The EFS metrology: From the production to the reason].

PubMed

Reifenberg, J-M; Riout, E; Leroy, A; Begue, S

2014-06-01

In order to answer statutory requirements and to anticipate the future needs and standards, the EFS is committed, since a few years, in a process of harmonization of its metrology function. In particular, the institution has opted for the skills development by internalizing the metrological traceability of the main critical quantities (temperature, volumetric) measurements. The development of metrology so resulted in a significant increase in calibration and testing activities. Methods are homogenized and improved through accreditations. The investment strategies are based on more and more demanding specifications. The performance of the equipments is better known and mastered. Technical expertise and maturity of the national metrology function today are assets to review in more informed ways the appropriateness of the applied periodicities. Analysis of numerous information and data in the calibration and testing reports could be pooled and operated on behalf of the unique establishment. The objective of this article is to illustrate these reflections with a few examples from of a feedback of the EFS Pyrénées Méditerranée. The analysis of some methods of qualification, the exploitation of the historical metrology in order to quantify the risk of non-compliance, and to adapt the control strategy, analysis of the criticality of an instrument in a measurement process, risk analyses are tools that deserve to be more widely exploited for that discipline wins in efficiency at the national level. Copyright © 2014 Elsevier Masson SAS. All rights reserved.

Forensic Metrology: Its Importance and Evolution in the United States

NASA Astrophysics Data System (ADS)

Vosk, JD Ted

2016-11-01

Forensic measurements play a significant role in the U.S. criminal justice system. Guilt or innocence, or the severity of a sentence, may depend upon the results of such measurements. Until recently, however, forensic disciplines were largely unaware of the field of metrology. Accordingly, proper measurement practices were often, and widely, neglected. These include failure to adopt proper calibration techniques, establish the traceability of results and determine measurement uncertainty. These failures undermine confidence in verdicts based upon forensic measurements. Over the past decade, though, the forensic sciences have been introduced to metrology and its principles leading to more reliable measurement practices. The impetus for this change was driven by many forces. Pressure came initially from criminal defense lawyers challenging metrologically unsound practices and results relied upon by government prosecutions. Litigation in the State of Washington led this movement spurring action by attorneys in other jurisdictions and eventually reform in the measurement practices of forensic labs around the country. Since then, the greater scientific community, other forensic scientists and even prosecutors have joined the fight. This paper describes the fight to improve the quality of justice by the application of metrological principles and the evolution of the field of forensic metrology.

Freeform metrology using subaperture stitching interferometry

NASA Astrophysics Data System (ADS)

Supranowitz, Chris; Lormeau, Jean-Pierre; Maloney, Chris; Murphy, Paul; Dumas, Paul

2016-11-01

As applications for freeform optics continue to grow, the need for high-precision metrology is becoming more of a necessity. Currently, coordinate measuring machines (CMM) that implement touch probes or optical probes can measure the widest ranges of shapes of freeform optics, but these measurement solutions often lack sufficient lateral resolution and accuracy. Subaperture stitching interferometry (SSI™) extends traditional Fizeau interferometry to provide accurate, high-resolution measurements of flats, spheres, and aspheres, and development is currently on-going to enable measurements of freeform surfaces. We will present recent freeform metrology results, including repeatability and cross-test data. We will also present MRF® polishing results where the stitched data was used as the input "hitmap" to the deterministic polishing process.

EQ-10 electrodeless Z-pinch EUV source for metrology applications

NASA Astrophysics Data System (ADS)

Gustafson, Deborah; Horne, Stephen F.; Partlow, Matthew J.; Besen, Matthew M.; Smith, Donald K.; Blackborow, Paul A.

2011-11-01

With EUV Lithography systems shipping, the requirements for highly reliable EUV sources for mask inspection and resist outgassing are becoming better defined, and more urgent. The sources needed for metrology applications are very different than that needed for lithography; brightness (not power) is the key requirement. Suppliers for HVM EUV sources have all resources working on high power and have not entered the smaller market for metrology. Energetiq Technology has been shipping the EQ-10 Electrodeless Z-pinchTM light source since 19951. The source is currently being used for metrology, mask inspection, and resist development2-4. These applications require especially stable performance in both output power and plasma size and position. Over the last 6 years Energetiq has made many source modifications which have included better thermal management to increase the brightness and power of the source. We now have introduced a new source that will meet requirements of some of the mask metrology first generation tools; this source will be reviewed.

Quantum metrology with a transmon qutrit

NASA Astrophysics Data System (ADS)

Shlyakhov, A. R.; Zemlyanov, V. V.; Suslov, M. V.; Lebedev, A. V.; Paraoanu, G. S.; Lesovik, G. B.; Blatter, G.

2018-02-01

Making use of coherence and entanglement as metrological quantum resources allows us to improve the measurement precision from the shot-noise or quantum limit to the Heisenberg limit. Quantum metrology then relies on the availability of quantum engineered systems that involve controllable quantum degrees of freedom which are sensitive to the measured quantity. Sensors operating in the qubit mode and exploiting their coherence in a phase-sensitive measurement have been shown to approach the Heisenberg scaling in precision. Here, we show that this result can be further improved by operating the quantum sensor in the qudit mode, i.e., by exploiting d rather than two levels. Specifically, we describe the metrological algorithm for using a superconducting transmon device operating in a qutrit mode as a magnetometer. The algorithm is based on the base-3 semiquantum Fourier transformation and enhances the quantum theoretical performance of the sensor by a factor of 2. Even more, the practical gain of our qutrit implementation is found in a reduction of the number of iteration steps of the quantum Fourier transformation by the factor ln(2 )/ln(3 )≈0.63 compared to the qubit mode. We show that a two-tone capacitively coupled radio-frequency signal is sufficient for implementation of the algorithm.

Metrology Standards for Quantitative Imaging Biomarkers

PubMed Central

Obuchowski, Nancy A.; Kessler, Larry G.; Raunig, David L.; Gatsonis, Constantine; Huang, Erich P.; Kondratovich, Marina; McShane, Lisa M.; Reeves, Anthony P.; Barboriak, Daniel P.; Guimaraes, Alexander R.; Wahl, Richard L.

2015-01-01

Although investigators in the imaging community have been active in developing and evaluating quantitative imaging biomarkers (QIBs), the development and implementation of QIBs have been hampered by the inconsistent or incorrect use of terminology or methods for technical performance and statistical concepts. Technical performance is an assessment of how a test performs in reference objects or subjects under controlled conditions. In this article, some of the relevant statistical concepts are reviewed, methods that can be used for evaluating and comparing QIBs are described, and some of the technical performance issues related to imaging biomarkers are discussed. More consistent and correct use of terminology and study design principles will improve clinical research, advance regulatory science, and foster better care for patients who undergo imaging studies. © RSNA, 2015 PMID:26267831

Dimensional metrology of lab-on-a-chip internal structures: a comparison of optical coherence tomography with confocal fluorescence microscopy.

PubMed

Reyes, D R; Halter, M; Hwang, J

2015-07-01

The characterization of internal structures in a polymeric microfluidic device, especially of a final product, will require a different set of optical metrology tools than those traditionally used for microelectronic devices. We demonstrate that optical coherence tomography (OCT) imaging is a promising technique to characterize the internal structures of poly(methyl methacrylate) devices where the subsurface structures often cannot be imaged by conventional wide field optical microscopy. The structural details of channels in the devices were imaged with OCT and analyzed with an in-house written ImageJ macro in an effort to identify the structural details of the channel. The dimensional values obtained with OCT were compared with laser-scanning confocal microscopy images of channels filled with a fluorophore solution. Attempts were also made using confocal reflectance and interferometry microscopy to measure the channel dimensions, but artefacts present in the images precluded quantitative analysis. OCT provided the most accurate estimates for the channel height based on an analysis of optical micrographs obtained after destructively slicing the channel with a microtome. OCT may be a promising technique for the future of three-dimensional metrology of critical internal structures in lab-on-a-chip devices because scans can be performed rapidly and noninvasively prior to their use. © 2015 The Authors Journal of Microscopy © 2015 Royal Microscopical Society.

Addressing FinFET metrology challenges in 1X node using tilt-beam CD-SEM

NASA Astrophysics Data System (ADS)

Zhang, Xiaoxiao; Zhou, Hua; Ge, Zhenhua; Vaid, Alok; Konduparthi, Deepasree; Osorio, Carmen; Ventola, Stefano; Meir, Roi; Shoval, Ori; Kris, Roman; Adan, Ofer; Bar-Zvi, Maayan

2014-04-01

At 1X node, 3D FinFETS raise a number of new metrology challenges. Gate height and fin height are two of the most important parameters for process control. At present there is a metrology gap in inline in-die measurement of these parameters. In order to fill this metrology gap, in-column beam tilt has been developed and implemented on Applied Materials V4i+ top-down CD-SEM for height measurement. A low tilt (5°) beam and a high tilt (14°) beam have been calibrated to obtain two sets of images providing measurement of sidewall edge width to calculate height in the host. Evaluations are done with applications in both gate height and fin height. TEM correlation with R2 being 0.89 and precision of 0.81nm have been achieved on various in-die features in gate height application. Fin height measurement shows less accuracy (R2 being 0.77) and precision (1.49 nm) due to challenges brought by fin geometry, yet still promising as first attempt. Sensitivity to DOE offset, die-to-die and in-die variation is demonstrated in both gate height and fin height. Process defect is successfully captured from inline wafers with gate height measurement implemented in production. This is the first successful demonstration of inline in-die gate height measurement for 14nm FinFET process control.

Diffraction gratings metrology and ray-tracing results for an XUV Raman spectrometer at FLASH

PubMed Central

Dziarzhytski, Siarhei; Siewert, Frank; Gwalt, Grzegorz; Seliger, Tino; Rübhausen, Michael; Weigelt, Holger; Brenner, Günter

2018-01-01

The extreme-ultraviolet double-stage imaging Raman spectrometer is a permanent experimental endstation at the plane-grating monochromator beamline branch PG1 at FLASH at DESY in Hamburg, Germany. This unique instrument covers the photon energy range from 20 to 200 eV with high energy resolution of about 2 to 20 meV (design values) featuring an efficient elastic line suppression as well as effective stray light rejection. Such a design enables studies of low-energy excitations like, for example, phonons in solids close to the vicinity of the elastic line. The Raman spectrometer effectively operates with four reflective off-axial parabolic mirrors and two plane-grating units. The optics quality and their precise alignment are crucial to guarantee best performance of the instrument. Here, results on a comprehensive investigation of the quality of the spectrometer diffraction gratings are presented. The gratings have been characterized by ex situ metrology at the BESSY-II Optics Laboratory, employing slope measuring deflectometry and interferometry as well as atomic force microscopy studies. The efficiency of these key optical elements has been measured at the at-wavelength metrology laboratory using the reflectometer at the BESSY-II Optics beamline. Also, the metrology results are discussed with respect to the expected resolving power of the instrument by including them in ray-tracing studies of the instrument. PMID:29271763

Aerial photography for sensing plant anomalies

NASA Technical Reports Server (NTRS)

Gausman, H. W.; Cardenas, R.; Hart, W. G.

1970-01-01

Changes in the red tonal response of Kodak Ektrachrome Infrared Aero 8443 film (EIR) are often incorrectly attributed solely to variations in infrared light reflectance of plant leaves, when the primary influence is a difference in visible light reflectance induced by varying chlorophyll contents. Comparisons are made among aerial photographic images of high- and low-chlorophyll foliage. New growth, foot rot, and boron and chloride nutrient toxicites produce low-chlorophyll foliage, and EIR transparency images of light red or white compared with dark-red images of high-chlorophyll foliage. Deposits of the sooty mold fungus that subsists on the honeydew produced by brown soft scale insects, obscure the citrus leaves' green color. Infected trees appear as black images on EIR film transparencies compared with red images of healthy trees.

Registration performance on EUV masks using high-resolution registration metrology

NASA Astrophysics Data System (ADS)

Steinert, Steffen; Solowan, Hans-Michael; Park, Jinback; Han, Hakseung; Beyer, Dirk; Scherübl, Thomas

2016-10-01

Next-generation lithography based on EUV continues to move forward to high-volume manufacturing. Given the technical challenges and the throughput concerns a hybrid approach with 193 nm immersion lithography is expected, at least in the initial state. Due to the increasing complexity at smaller nodes a multitude of different masks, both DUV (193 nm) and EUV (13.5 nm) reticles, will then be required in the lithography process-flow. The individual registration of each mask and the resulting overlay error are of crucial importance in order to ensure proper functionality of the chips. While registration and overlay metrology on DUV masks has been the standard for decades, this has yet to be demonstrated on EUV masks. Past generations of mask registration tools were not necessarily limited in their tool stability, but in their resolution capabilities. The scope of this work is an image placement investigation of high-end EUV masks together with a registration and resolution performance qualification. For this we employ a new generation registration metrology system embedded in a production environment for full-spec EUV masks. This paper presents excellent registration performance not only on standard overlay markers but also on more sophisticated e-beam calibration patterns.

Assessing a potential solution for spatially referencing of historical aerial photography in South Africa

NASA Astrophysics Data System (ADS)

Denner, Michele; Raubenheimer, Jacobus H.

2018-05-01

Historical aerial photography has become a valuable commodity in any country, as it provides a precise record of historical land management over time. In a developing country, such as South Africa, that has undergone enormous political and social change over the last years, such photography is invaluable as it provides a clear indication of past injustices and serves as an aid to addressing post-apartheid issues such as land reform and land redistribution. National mapping organisations throughout the world have vast repositories of such historical aerial photography. In order to effectively use these datasets in today's digital environment requires that it be georeferenced to an accuracy that is suitable for the intended purpose. Using image-to-image georeferencing techniques, this research sought to determine the accuracies achievable for ortho-rectifying large volumes of historical aerial imagery, against the national standard for ortho-rectification in South Africa, using two different types of scanning equipment. The research conducted four tests using aerial photography from different time epochs over a period of sixty years, where the ortho-rectification matched each test to an already ortho-rectified mosaic of a developed area of mixed land use. The results of each test were assessed in terms of visual accuracy, spatial accuracy and conformance to the national standard for ortho-rectification in South Africa. The results showed a decrease in the overall accuracy of the image as the epoch range between the historical image and the reference image increased. Recommendations on the applications possible given the different epoch ranges and scanning equipment used are provided.

Toward autonomous avian-inspired grasping for micro aerial vehicles.

PubMed

Thomas, Justin; Loianno, Giuseppe; Polin, Joseph; Sreenath, Koushil; Kumar, Vijay

2014-06-01

Micro aerial vehicles, particularly quadrotors, have been used in a wide range of applications. However, the literature on aerial manipulation and grasping is limited and the work is based on quasi-static models. In this paper, we draw inspiration from agile, fast-moving birds such as raptors, that are able to capture moving prey on the ground or in water, and develop similar capabilities for quadrotors. We address dynamic grasping, an approach to prehensile grasping in which the dynamics of the robot and its gripper are significant and must be explicitly modeled and controlled for successful execution. Dynamic grasping is relevant for fast pick-and-place operations, transportation and delivery of objects, and placing or retrieving sensors. We show how this capability can be realized (a) using a motion capture system and (b) without external sensors relying only on onboard sensors. In both cases we describe the dynamic model, and trajectory planning and control algorithms. In particular, we present a methodology for flying and grasping a cylindrical object using feedback from a monocular camera and an inertial measurement unit onboard the aerial robot. This is accomplished by mapping the dynamics of the quadrotor to a level virtual image plane, which in turn enables dynamically-feasible trajectory planning for image features in the image space, and a vision-based controller with guaranteed convergence properties. We also present experimental results obtained with a quadrotor equipped with an articulated gripper to illustrate both approaches.

In-Process Metrology And Control Of Large Optical Grinders

NASA Astrophysics Data System (ADS)

Anderson, D. S.; Ketelsen, D.; Kittrell, W. Cary; Kuhn, Wm; Parks, R. E.; Stahl, P.

1987-01-01

The advent of rapid figure generation at the University of Arizona has prompted the development of rapid metrology techniques. The success and efficiency of the generating process is highly dependent on timely and accurate measurements to update the feedback loop between machine and optician. We will describe the advantages and problems associated with the in-process metrology and control systems used at the Optical Sciences Center.

Evaluation of remote sensing aerial systems in existing transportation practices, phase II.

DOT National Transportation Integrated Search

2011-06-01

A low-cost aerial platform represents a flexible tool for acquiring high-resolution images for ground areas of interest. The geo-referencing of objects within these images could benefit civil engineers in a variety of research areas including, but no...

Metrology: Calibration and measurement processes guidelines

NASA Technical Reports Server (NTRS)

Castrup, Howard T.; Eicke, Woodward G.; Hayes, Jerry L.; Mark, Alexander; Martin, Robert E.; Taylor, James L.

1994-01-01

The guide is intended as a resource to aid engineers and systems contracts in the design, implementation, and operation of metrology, calibration, and measurement systems, and to assist NASA personnel in the uniform evaluation of such systems supplied or operated by contractors. Methodologies and techniques acceptable in fulfilling metrology quality requirements for NASA programs are outlined. The measurement process is covered from a high level through more detailed discussions of key elements within the process, Emphasis is given to the flowdown of project requirements to measurement system requirements, then through the activities that will provide measurements with defined quality. In addition, innovations and techniques for error analysis, development of statistical measurement process control, optimization of calibration recall systems, and evaluation of measurement uncertainty are presented.

Efficiency improvements of offline metrology job creation

NASA Astrophysics Data System (ADS)

Zuniga, Victor J.; Carlson, Alan; Podlesny, John C.; Knutrud, Paul C.

1999-06-01

Progress of the first lot of a new design through the production line is watched very closely. All performance metrics, cycle-time, in-line measurement results and final electrical performance are critical. Rapid movement of this lot through the line has serious time-to-market implications. Having this material waiting at a metrology operation for an engineer to create a measurement job plan wastes valuable turnaround time. Further, efficient use of a metrology system is compromised by the time required to create and maintain these measurement job plans. Thus, having a method to develop metrology job plans prior to the actual running of the material through the manufacture area can significantly improve both cycle time and overall equipment efficiency. Motorola and Schlumberger have worked together to develop and test such a system. The Remote Job Generator (RJG) created job plans for new device sin a manufacturing process from an NT host or workstation, offline. This increases available system tim effort making production measurements, decreases turnaround time on job plan creation and editing, and improves consistency across job plans. Most importantly this allows job plans for new devices to be available before the first wafers of the device arrive at the tool for measurement. The software also includes a database manager which allows updates of existing job plans to incorporate measurement changes required by process changes or measurement optimization. This paper will review the result of productivity enhancements through the increased metrology utilization and decreased cycle time associated with the use of RJG. Finally, improvements in process control through better control of Job Plans across different devices and layers will be discussed.

Use of micro unmanned aerial vehicles for roadside condition assessment

DOT National Transportation Integrated Search

2010-12-01

Micro unmanned aerial vehicles (MUAVs) that are equipped with digital imaging systems and global : positioning systems provide a potential opportunity for improving the effectiveness and safety of roadside : condition and inventory surveys. This stud...

Enhancement of spectral quality of archival aerial photographs using satellite imagery for detection of land cover

NASA Astrophysics Data System (ADS)

Siok, Katarzyna; Jenerowicz, Agnieszka; Woroszkiewicz, Małgorzata

2017-07-01

Archival aerial photographs are often the only reliable source of information about the area. However, these data are single-band data that do not allow unambiguous detection of particular forms of land cover. Thus, the authors of this article seek to develop a method of coloring panchromatic aerial photographs, which enable increasing the spectral information of such images. The study used data integration algorithms based on pansharpening, implemented in commonly used remote sensing programs: ERDAS, ENVI, and PCI. Aerial photos and Landsat multispectral data recorded in 1987 and 2016 were chosen. This study proposes the use of modified intensity-hue-saturation and Brovey methods. The use of these methods enabled the addition of red-green-blue (RGB) components to monochrome images, thus enhancing their interpretability and spectral quality. The limitations of the proposed method relate to the availability of RGB satellite imagery, the accuracy of mutual orientation of the aerial and the satellite data, and the imperfection of archival aerial photographs. Therefore, it should be expected that the results of coloring will not be perfect compared to the results of the fusion of recent data with a similar ground sampling resolution, but still, they will allow a more accurate and efficient classification of land cover registered on archival aerial photographs.

Semantic Segmentation and Difference Extraction via Time Series Aerial Video Camera and its Application

NASA Astrophysics Data System (ADS)

Amit, S. N. K.; Saito, S.; Sasaki, S.; Kiyoki, Y.; Aoki, Y.

2015-04-01

Google earth with high-resolution imagery basically takes months to process new images before online updates. It is a time consuming and slow process especially for post-disaster application. The objective of this research is to develop a fast and effective method of updating maps by detecting local differences occurred over different time series; where only region with differences will be updated. In our system, aerial images from Massachusetts's road and building open datasets, Saitama district datasets are used as input images. Semantic segmentation is then applied to input images. Semantic segmentation is a pixel-wise classification of images by implementing deep neural network technique. Deep neural network technique is implemented due to being not only efficient in learning highly discriminative image features such as road, buildings etc., but also partially robust to incomplete and poorly registered target maps. Then, aerial images which contain semantic information are stored as database in 5D world map is set as ground truth images. This system is developed to visualise multimedia data in 5 dimensions; 3 dimensions as spatial dimensions, 1 dimension as temporal dimension, and 1 dimension as degenerated dimensions of semantic and colour combination dimension. Next, ground truth images chosen from database in 5D world map and a new aerial image with same spatial information but different time series are compared via difference extraction method. The map will only update where local changes had occurred. Hence, map updating will be cheaper, faster and more effective especially post-disaster application, by leaving unchanged region and only update changed region.

"A" Is for Aerial Maps and Art

ERIC Educational Resources Information Center

Todd, Reese H.; Delahunty, Tina

2007-01-01

The technology of satellite imagery and remote sensing adds a new dimension to teaching and learning about maps with elementary school children. Just a click of the mouse brings into view some images of the world that could only be imagined a generation ago. Close-up aerial pictures of the school and neighborhood quickly catch the interest of…

Subaperture metrology technologies extend capabilities in optics manufacturing

NASA Astrophysics Data System (ADS)

Tricard, Marc; Forbes, Greg; Murphy, Paul

2005-10-01

Subaperture polishing technologies have radically changed the landscape of precision optics manufacturing and enabled the production of higher precision optics with increasingly difficult figure requirements. However, metrology is a critical piece of the optics fabrication process, and the dependence on interferometry is especially acute for computer-controlled, deterministic finishing. Without accurate full-aperture metrology, figure correction using subaperture polishing technologies would not be possible. QED Technologies has developed the Subaperture Stitching Interferometer (SSI) that extends the effective aperture and dynamic range of a phase measuring interferometer. The SSI's novel developments in software and hardware improve the capacity and accuracy of traditional interferometers, overcoming many of the limitations previously faced. The SSI performs high-accuracy automated measurements of spheres, flats, and mild aspheres up to 200 mm in diameter by stitching subaperture data. The system combines a six-axis precision workstation, a commercial Fizeau interferometer of 4" or 6" aperture, and dedicated software. QED's software automates the measurement design, data acquisition, and mathematical reconstruction of the full-aperture phase map. The stitching algorithm incorporates a general framework for compensating several types of errors introduced by the interferometer and stage mechanics. These include positioning errors, viewing system distortion, the system reference wave error, etc. The SSI has been proven to deliver the accurate and flexible metrology that is vital to precision optics fabrication. This paper will briefly review the capabilities of the SSI as a production-ready, metrology system that enables costeffective manufacturing of precision optical surfaces.

DFM flow by using combination between design based metrology system and model based verification at sub-50nm memory device

NASA Astrophysics Data System (ADS)

Kim, Cheol-kyun; Kim, Jungchan; Choi, Jaeseung; Yang, Hyunjo; Yim, Donggyu; Kim, Jinwoong

2007-03-01

As the minimum transistor length is getting smaller, the variation and uniformity of transistor length seriously effect device performance. So, the importance of optical proximity effects correction (OPC) and resolution enhancement technology (RET) cannot be overemphasized. However, OPC process is regarded by some as a necessary evil in device performance. In fact, every group which includes process and design, are interested in whole chip CD variation trend and CD uniformity, which represent real wafer. Recently, design based metrology systems are capable of detecting difference between data base to wafer SEM image. Design based metrology systems are able to extract information of whole chip CD variation. According to the results, OPC abnormality was identified and design feedback items are also disclosed. The other approaches are accomplished on EDA companies, like model based OPC verifications. Model based verification will be done for full chip area by using well-calibrated model. The object of model based verification is the prediction of potential weak point on wafer and fast feed back to OPC and design before reticle fabrication. In order to achieve robust design and sufficient device margin, appropriate combination between design based metrology system and model based verification tools is very important. Therefore, we evaluated design based metrology system and matched model based verification system for optimum combination between two systems. In our study, huge amount of data from wafer results are classified and analyzed by statistical method and classified by OPC feedback and design feedback items. Additionally, novel DFM flow would be proposed by using combination of design based metrology and model based verification tools.

Aerial Photography Summary Record System

USGS Publications Warehouse

,

1998-01-01

The Aerial Photography Summary Record System (APSRS) describes aerial photography projects that meet specified criteria over a given geographic area of the United States and its territories. Aerial photographs are an important tool in cartography and a number of other professions. Land use planners, real estate developers, lawyers, environmental specialists, and many other professionals rely on detailed and timely aerial photographs. Until 1975, there was no systematic approach to locate an aerial photograph, or series of photographs, quickly and easily. In that year, the U.S. Geological Survey (USGS) inaugurated the APSRS, which has become a standard reference for users of aerial photographs.

1. NORTHWEST OBLIQUE AERIAL VIEW OF FORT DELAWARE AND PEA ...

Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

1. NORTHWEST OBLIQUE AERIAL VIEW OF FORT DELAWARE AND PEA PATCH ISLAND. REMAINS OF SEA WALL VISIBLE IN FOREGROUND AND RIGHT OF IMAGE. - Fort Delaware, Sea Wall, Pea Patch Island, Delaware City, New Castle County, DE

Adjustment method for embedded metrology engine in an EM773 series microcontroller.

PubMed

Blazinšek, Iztok; Kotnik, Bojan; Chowdhury, Amor; Kačič, Zdravko

2015-09-01

This paper presents the problems of implementation and adjustment (calibration) of a metrology engine embedded in NXP's EM773 series microcontroller. The metrology engine is used in a smart metering application to collect data about energy utilization and is controlled with the use of metrology engine adjustment (calibration) parameters. The aim of this research is to develop a method which would enable the operators to find and verify the optimum parameters which would ensure the best possible accuracy. Properly adjusted (calibrated) metrology engines can then be used as a base for variety of products used in smart and intelligent environments. This paper focuses on the problems encountered in the development, partial automatisation, implementation and verification of this method. Copyright © 2015 ISA. Published by Elsevier Ltd. All rights reserved.

Metrological analysis of a virtual flowmeter-based transducer for cryogenic helium

DOE Office of Scientific and Technical Information (OSTI.GOV)

Arpaia, P., E-mail: pasquale.arpaia@unina.it; Technology Department, European Organization for Nuclear Research; Girone, M., E-mail: mario.girone@cern.ch

2015-12-15

The metrological performance of a virtual flowmeter-based transducer for monitoring helium under cryogenic conditions is assessed. At this aim, an uncertainty model of the transducer, mainly based on a valve model, exploiting finite-element approach, and a virtual flowmeter model, based on the Sereg-Schlumberger method, are presented. The models are validated experimentally on a case study for helium monitoring in cryogenic systems at the European Organization for Nuclear Research (CERN). The impact of uncertainty sources on the transducer metrological performance is assessed by a sensitivity analysis, based on statistical experiment design and analysis of variance. In this way, the uncertainty sourcesmore » most influencing metrological performance of the transducer are singled out over the input range as a whole, at varying operating and setting conditions. This analysis turns out to be important for CERN cryogenics operation because the metrological design of the transducer is validated, and its components and working conditions with critical specifications for future improvements are identified.« less

Building Roof Segmentation from Aerial Images Using a Line-and Region-Based Watershed Segmentation Technique

PubMed Central

Merabet, Youssef El; Meurie, Cyril; Ruichek, Yassine; Sbihi, Abderrahmane; Touahni, Raja

2015-01-01

In this paper, we present a novel strategy for roof segmentation from aerial images (orthophotoplans) based on the cooperation of edge- and region-based segmentation methods. The proposed strategy is composed of three major steps. The first one, called the pre-processing step, consists of simplifying the acquired image with an appropriate couple of invariant and gradient, optimized for the application, in order to limit illumination changes (shadows, brightness, etc.) affecting the images. The second step is composed of two main parallel treatments: on the one hand, the simplified image is segmented by watershed regions. Even if the first segmentation of this step provides good results in general, the image is often over-segmented. To alleviate this problem, an efficient region merging strategy adapted to the orthophotoplan particularities, with a 2D modeling of roof ridges technique, is applied. On the other hand, the simplified image is segmented by watershed lines. The third step consists of integrating both watershed segmentation strategies into a single cooperative segmentation scheme in order to achieve satisfactory segmentation results. Tests have been performed on orthophotoplans containing 100 roofs with varying complexity, and the results are evaluated with the VINETcriterion using ground-truth image segmentation. A comparison with five popular segmentation techniques of the literature demonstrates the effectiveness and the reliability of the proposed approach. Indeed, we obtain a good segmentation rate of 96% with the proposed method compared to 87.5% with statistical region merging (SRM), 84% with mean shift, 82% with color structure code (CSC), 80% with efficient graph-based segmentation algorithm (EGBIS) and 71% with JSEG. PMID:25648706

The future of structural fieldwork - UAV assisted aerial photogrammetry

NASA Astrophysics Data System (ADS)

Vollgger, Stefan; Cruden, Alexander

2015-04-01

Unmanned aerial vehicles (UAVs), commonly referred to as drones, are opening new and low cost possibilities to acquire high-resolution aerial images and digital surface models (DSM) for applications in structural geology. UAVs can be programmed to fly autonomously along a user defined grid to systematically capture high-resolution photographs, even in difficult to access areas. The photographs are subsequently processed using software that employ SIFT (scale invariant feature transform) and SFM (structure from motion) algorithms. These photogrammetric routines allow the extraction of spatial information (3D point clouds, digital elevation models, 3D meshes, orthophotos) from 2D images. Depending on flight altitude and camera setup, sub-centimeter spatial resolutions can be achieved. By "digitally mapping" georeferenced 3D models and images, orientation data can be extracted directly and used to analyse the structural framework of the mapped object or area. We present UAV assisted aerial mapping results from a coastal platform near Cape Liptrap (Victoria, Australia), where deformed metasediments of the Palaeozoic Lachlan Fold Belt are exposed. We also show how orientation and spatial information of brittle and ductile structures extracted from the photogrammetric model can be linked to the progressive development of folds and faults in the region. Even though there are both technical and legislative limitations, which might prohibit the use of UAVs without prior commercial licensing and training, the benefits that arise from the resulting high-resolution, photorealistic models can substantially contribute to the collection of new data and insights for applications in structural geology.

Metrological approach to quantitative analysis of clinical samples by LA-ICP-MS: A critical review of recent studies.

PubMed

Sajnóg, Adam; Hanć, Anetta; Barałkiewicz, Danuta

2018-05-15

Analysis of clinical specimens by imaging techniques allows to determine the content and distribution of trace elements on the surface of the examined sample. In order to obtain reliable results, the developed procedure should be based not only on the properly prepared sample and performed calibration. It is also necessary to carry out all phases of the procedure in accordance with the principles of chemical metrology whose main pillars are the use of validated analytical methods, establishing the traceability of the measurement results and the estimation of the uncertainty. This review paper discusses aspects related to sampling, preparation and analysis of clinical samples by laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) with emphasis on metrological aspects, i.e. selected validation parameters of the analytical method, the traceability of the measurement result and the uncertainty of the result. This work promotes the introduction of metrology principles for chemical measurement with emphasis to the LA-ICP-MS which is the comparative method that requires studious approach to the development of the analytical procedure in order to acquire reliable quantitative results. Copyright © 2018 Elsevier B.V. All rights reserved.

Toward Automatic Georeferencing of Archival Aerial Photogrammetric Surveys

NASA Astrophysics Data System (ADS)

Giordano, S.; Le Bris, A.; Mallet, C.

2018-05-01

Images from archival aerial photogrammetric surveys are a unique and relatively unexplored means to chronicle 3D land-cover changes over the past 100 years. They provide a relatively dense temporal sampling of the territories with very high spatial resolution. Such time series image analysis is a mandatory baseline for a large variety of long-term environmental monitoring studies. The current bottleneck for accurate comparison between epochs is their fine georeferencing step. No fully automatic method has been proposed yet and existing studies are rather limited in terms of area and number of dates. State-of-the art shows that the major challenge is the identification of ground references: cartographic coordinates and their position in the archival images. This task is manually performed, and extremely time-consuming. This paper proposes to use a photogrammetric approach, and states that the 3D information that can be computed is the key to full automation. Its original idea lies in a 2-step approach: (i) the computation of a coarse absolute image orientation; (ii) the use of the coarse Digital Surface Model (DSM) information for automatic absolute image orientation. It only relies on a recent orthoimage+DSM, used as master reference for all epochs. The coarse orthoimage, compared with such a reference, allows the identification of dense ground references and the coarse DSM provides their position in the archival images. Results on two areas and 5 dates show that this method is compatible with long and dense archival aerial image series. Satisfactory planimetric and altimetric accuracies are reported, with variations depending on the ground sampling distance of the images and the location of the Ground Control Points.

The Remarkable Metrological History of Radiocarbon Dating [II].

PubMed

Currie, Lloyd A

2004-01-01

This article traces the metrological history of radiocarbon, from the initial breakthrough devised by Libby, to minor (evolutionary) and major (revolutionary) advances that have brought (14)C measurement from a crude, bulk [8 g carbon] dating tool, to a refined probe for dating tiny amounts of precious artifacts, and for "molecular dating" at the 10 µg to 100 µg level. The metrological advances led to opportunities and surprises, such as the non-monotonic dendrochronological calibration curve and the "bomb effect," that gave rise to new multidisciplinary areas of application, ranging from archaeology and anthropology to cosmic ray physics to oceanography to apportionment of anthropogenic pollutants to the reconstruction of environmental history. Beyond the specific topic of natural (14)C, it is hoped that this account may serve as a metaphor for young scientists, illustrating that just when a scientific discipline may appear to be approaching maturity, unanticipated metrological advances in their own chosen fields, and unanticipated anthropogenic or natural chemical events in the environment, can spawn new areas of research having exciting theoretical and practical implications.

The Remarkable Metrological History of Radiocarbon Dating [II

PubMed Central

Currie, Lloyd A.

2004-01-01

This article traces the metrological history of radiocarbon, from the initial breakthrough devised by Libby, to minor (evolutionary) and major (revolutionary) advances that have brought 14C measurement from a crude, bulk [8 g carbon] dating tool, to a refined probe for dating tiny amounts of precious artifacts, and for “molecular dating” at the 10 µg to 100 µg level. The metrological advances led to opportunities and surprises, such as the non-monotonic dendrochronological calibration curve and the “bomb effect,” that gave rise to new multidisciplinary areas of application, ranging from archaeology and anthropology to cosmic ray physics to oceanography to apportionment of anthropogenic pollutants to the reconstruction of environmental history. Beyond the specific topic of natural 14C, it is hoped that this account may serve as a metaphor for young scientists, illustrating that just when a scientific discipline may appear to be approaching maturity, unanticipated metrological advances in their own chosen fields, and unanticipated anthropogenic or natural chemical events in the environment, can spawn new areas of research having exciting theoretical and practical implications. PMID:27366605

Contour metrology using critical dimension atomic force microscopy

NASA Astrophysics Data System (ADS)

Orji, Ndubuisi G.; Dixson, Ronald G.; Vladár, András E.; Ming, Bin; Postek, Michael T.

2012-03-01

The critical dimension atomic force microscope (CD-AFM), which is used as a reference instrument in lithography metrology, has been proposed as a complementary instrument for contour measurement and verification. Although data from CD-AFM is inherently three dimensional, the planar two-dimensional data required for contour metrology is not easily extracted from the top-down CD-AFM data. This is largely due to the limitations of the CD-AFM method for controlling the tip position and scanning. We describe scanning techniques and profile extraction methods to obtain contours from CD-AFM data. We also describe how we validated our technique, and explain some of its limitations. Potential sources of error for this approach are described, and a rigorous uncertainty model is presented. Our objective is to show which data acquisition and analysis methods could yield optimum contour information while preserving some of the strengths of CD-AFM metrology. We present comparison of contours extracted using our technique to those obtained from the scanning electron microscope (SEM), and the helium ion microscope (HIM).

Study on Practical Technologies of Aerial Triangulation for Real Scene 3d Moeling with Oblique Photography

NASA Astrophysics Data System (ADS)

Cai, Z.; Liu, W.; Luo, G.; Xiang, Z.

2018-04-01

The key technologies in the real scene 3D modeling of oblique photography mainly include the data acquisition of oblique photography, layout and surveying of photo control points, oblique camera calibration, aerial triangulation, dense matching of multi-angle image, building of triangulation irregular network (TIN) and TIN simplification and automatic texture mapping, among which aerial triangulation is the core and the results of aerial triangulation directly affect the later model effect and the corresponding data accuracy. Starting from this point of view, this paper aims to study the practical technologies of aerial triangulation for real scene 3D modeling with oblique photography and finally proposes a technical method of aerial triangulation with oblique photography which can be put into practice.

The Development and Flight Testing of an Aerially Deployed Unmanned Aerial System

NASA Astrophysics Data System (ADS)

Smith, Andrew

An investigation into the feasibility of aerial deployed unmanned aerial vehicles was completed. The investigation included the development and flight testing of multiple unmanned aerial systems to investigate the different components of potential aerial deployment missions. The project consisted of two main objectives; the first objective dealt with the development of an airframe capable of surviving aerial deployment from a rocket and then self assembling from its stowed configuration into its flight configuration. The second objective focused on the development of an autopilot capable of performing basic guidance, navigation, and control following aerial deployment. To accomplish these two objectives multiple airframes were developed to verify their completion experimentally. The first portion of the project, investigating the feasibility of surviving an aerial deployment, was completed using a fixed wing glider that following a successful deployment had 52 seconds of controlled flight. Before developing the autopilot in the second phase of the project, the glider was significantly upgraded to fix faults discovered in the glider flight testing and to enhance the system capabilities. Unfortunately to conform to outdoor flight restrictions imposed by the university and the Federal Aviation Administration it was required to switch airframes before flight testing of the new fixed wing platform could begin. As a result, an autopilot was developed for a quadrotor and verified experimentally completely indoors to remain within the limits of governing policies.

Laser and Optical Fiber Metrology in Romania

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sporea, Dan; Sporea, Adelina

2008-04-15

The Romanian government established in the last five years a National Program for the improvement of country's infrastructure of metrology. The set goal was to develop and accredit testing and calibration laboratories, as well as certification bodies, according to the ISO 17025:2005 norm. Our Institute benefited from this policy, and developed a laboratory for laser and optical fibers metrology in order to provide testing and calibration services for the certification of laser-based industrial, medical and communication products. The paper will present the laboratory accredited facilities and some of the results obtained in the evaluation of irradiation effects of optical andmore » optoelectronic parts, tests run under the EU's Fusion Program.« less

Reduction of wafer-edge overlay errors using advanced correction models, optimized for minimal metrology requirements

NASA Astrophysics Data System (ADS)

Kim, Min-Suk; Won, Hwa-Yeon; Jeong, Jong-Mun; Böcker, Paul; Vergaij-Huizer, Lydia; Kupers, Michiel; Jovanović, Milenko; Sochal, Inez; Ryan, Kevin; Sun, Kyu-Tae; Lim, Young-Wan; Byun, Jin-Moo; Kim, Gwang-Gon; Suh, Jung-Joon

2016-03-01

In order to optimize yield in DRAM semiconductor manufacturing for 2x nodes and beyond, the (processing induced) overlay fingerprint towards the edge of the wafer needs to be reduced. Traditionally, this is achieved by acquiring denser overlay metrology at the edge of the wafer, to feed field-by-field corrections. Although field-by-field corrections can be effective in reducing localized overlay errors, the requirement for dense metrology to determine the corrections can become a limiting factor due to a significant increase of metrology time and cost. In this study, a more cost-effective solution has been found in extending the regular correction model with an edge-specific component. This new overlay correction model can be driven by an optimized, sparser sampling especially at the wafer edge area, and also allows for a reduction of noise propagation. Lithography correction potential has been maximized, with significantly less metrology needs. Evaluations have been performed, demonstrating the benefit of edge models in terms of on-product overlay performance, as well as cell based overlay performance based on metrology-to-cell matching improvements. Performance can be increased compared to POR modeling and sampling, which can contribute to (overlay based) yield improvement. Based on advanced modeling including edge components, metrology requirements have been optimized, enabling integrated metrology which drives down overall metrology fab footprint and lithography cycle time.

Photomask applications of traceable atomic force microscope dimensional metrology at NIST

NASA Astrophysics Data System (ADS)

Dixson, Ronald; Orji, Ndubuisi G.; Potzick, James; Fu, Joseph; Allen, Richard A.; Cresswell, Michael; Smith, Stewart; Walton, Anthony J.; Tsiamis, Andreas

2007-10-01

The National Institute of Standards and Technology (NIST) has a multifaceted program in atomic force microscope (AFM) dimensional metrology. Three major instruments are being used for traceable measurements. The first is a custom in-house metrology AFM, called the calibrated AFM (C-AFM), the second is the first generation of commercially available critical dimension AFM (CD-AFM), and the third is a current generation CD-AFM at SEMATECH - for which NIST has established the calibration and uncertainties. All of these instruments have useful applications in photomask metrology. Linewidth reference metrology is an important application of CD-AFM. We have performed a preliminary comparison of linewidths measured by CD-AFM and by electrical resistance metrology on a binary mask. For the ten selected test structures with on-mask linewidths between 350 nm and 600 nm, most of the observed differences were less than 5 nm, and all of them were less than 10 nm. The offsets were often within the estimated uncertainties of the AFM measurements, without accounting for the effect of linewidth roughness or the uncertainties of electrical measurements. The most recent release of the NIST photomask standard - which is Standard Reference Material (SRM) 2059 - was also supported by CD-AFM reference measurements. We review the recent advances in AFM linewidth metrology that will reduce the uncertainty of AFM measurements on this and future generations of the NIST photomask standard. The NIST C-AFM has displacement metrology for all three axes traceable to the 633 nm wavelength of the iodine-stabilized He-Ne laser. One of the important applications of the C-AFM is step height metrology, which has some relevance to phase shift calibration. In the current generation of the system, the approximate level of relative standard uncertainty for step height measurements at the 100 nm scale is 0.1 %. We discuss the monitor history of a 290 nm step height, originally measured on the C-AFM with a 1

Object-based land-cover classification for metropolitan Phoenix, Arizona, using aerial photography

NASA Astrophysics Data System (ADS)

Li, Xiaoxiao; Myint, Soe W.; Zhang, Yujia; Galletti, Chritopher; Zhang, Xiaoxiang; Turner, Billie L.

2014-12-01

Detailed land-cover mapping is essential for a range of research issues addressed by the sustainability and land system sciences and planning. This study uses an object-based approach to create a 1 m land-cover classification map of the expansive Phoenix metropolitan area through the use of high spatial resolution aerial photography from National Agricultural Imagery Program. It employs an expert knowledge decision rule set and incorporates the cadastral GIS vector layer as auxiliary data. The classification rule was established on a hierarchical image object network, and the properties of parcels in the vector layer were used to establish land cover types. Image segmentations were initially utilized to separate the aerial photos into parcel sized objects, and were further used for detailed land type identification within the parcels. Characteristics of image objects from contextual and geometrical aspects were used in the decision rule set to reduce the spectral limitation of the four-band aerial photography. Classification results include 12 land-cover classes and subclasses that may be assessed from the sub-parcel to the landscape scales, facilitating examination of scale dynamics. The proposed object-based classification method provides robust results, uses minimal and readily available ancillary data, and reduces computational time.

Ultramap v3 - a Revolution in Aerial Photogrammetry

NASA Astrophysics Data System (ADS)

Reitinger, B.; Sormann, M.; Zebedin, L.; Schachinger, B.; Hoefler, M.; Tomasi, R.; Lamperter, M.; Gruber, B.; Schiester, G.; Kobald, M.; Unger, M.; Klaus, A.; Bernoegger, S.; Karner, K.; Wiechert, A.; Ponticelli, M.; Gruber, M.

2012-07-01

In the last years, Microsoft has driven innovation in the aerial photogrammetry community. Besides the market leading camera technology, UltraMap has grown to an outstanding photogrammetric workflow system which enables users to effectively work with large digital aerial image blocks in a highly automated way. Best example is the project-based color balancing approach which automatically balances images to a homogeneous block. UltraMap V3 continues innovation, and offers a revolution in terms of ortho processing. A fully automated dense matching module strives for high precision digital surface models (DSMs) which are calculated either on CPUs or on GPUs using a distributed processing framework. By applying constrained filtering algorithms, a digital terrain model can be derived which in turn can be used for fully automated traditional ortho texturing. By having the knowledge about the underlying geometry, seamlines can be generated automatically by applying cost functions in order to minimize visual disturbing artifacts. By exploiting the generated DSM information, a DSMOrtho is created using the balanced input images. Again, seamlines are detected automatically resulting in an automatically balanced ortho mosaic. Interactive block-based radiometric adjustments lead to a high quality ortho product based on UltraCam imagery. UltraMap v3 is the first fully integrated and interactive solution for supporting UltraCam images at best in order to deliver DSM and ortho imagery.

Vehicle Detection in Aerial Images Based on Region Convolutional Neural Networks and Hard Negative Example Mining.

PubMed

Tang, Tianyu; Zhou, Shilin; Deng, Zhipeng; Zou, Huanxin; Lei, Lin

2017-02-10

Detecting vehicles in aerial imagery plays an important role in a wide range of applications. The current vehicle detection methods are mostly based on sliding-window search and handcrafted or shallow-learning-based features, having limited description capability and heavy computational costs. Recently, due to the powerful feature representations, region convolutional neural networks (CNN) based detection methods have achieved state-of-the-art performance in computer vision, especially Faster R-CNN. However, directly using it for vehicle detection in aerial images has many limitations: (1) region proposal network (RPN) in Faster R-CNN has poor performance for accurately locating small-sized vehicles, due to the relatively coarse feature maps; and (2) the classifier after RPN cannot distinguish vehicles and complex backgrounds well. In this study, an improved detection method based on Faster R-CNN is proposed in order to accomplish the two challenges mentioned above. Firstly, to improve the recall, we employ a hyper region proposal network (HRPN) to extract vehicle-like targets with a combination of hierarchical feature maps. Then, we replace the classifier after RPN by a cascade of boosted classifiers to verify the candidate regions, aiming at reducing false detection by negative example mining. We evaluate our method on the Munich vehicle dataset and the collected vehicle dataset, with improvements in accuracy and robustness compared to existing methods.

Kite: status of the external metrology testbed for SIM

NASA Astrophysics Data System (ADS)

Dekens, Frank G.; Alvarez-Salazar, Oscar S.; Azizi, Alireza; Moser, Steven J.; Nemati, Bijan; Negron, John; Neville, Timothy; Ryan, Daniel

2004-10-01

Kite is a system level testbed for the External Metrology System of the Space Interferometry Mission (SIM). The External Metrology System is used to track the fiducials that are located at the centers of the interferometer's siderostats. The relative changes in their positions needs to be tracked to an accuracy of tens of picometers in order to correct for thermal deformations and attitude changes of the spacecraft. Because of the need for such high precision measurements, the Kite testbed was build to test both the metrology gauges and our ability to optically model the system at these levels. The Kite testbed is a redundant metrology truss, in which 6 lengths are measured, but only 5 are needed to define the system. The RMS error between the redundant measurements needs to be less than 140pm for the SIM Wide-Angle observing scenario and less than 8 pm for the Narrow-Angle observing scenario. With our current testbed layout, we have achieved an RMS of 85 pm in the Wide-Angle case, meeting the goal. For the Narrow-Angle case, we have reached 5.8 pm, but only for on-axis observations. We describe the testbed improvements that have been made since our initial results, and outline the future Kite changes that will add further effects that SIM faces in order to make the testbed more representative of SIM.

Method of radiometric quality assessment of NIR images acquired with a custom sensor mounted on an unmanned aerial vehicle

NASA Astrophysics Data System (ADS)

Wierzbicki, Damian; Fryskowska, Anna; Kedzierski, Michal; Wojtkowska, Michalina; Delis, Paulina

2018-01-01

Unmanned aerial vehicles are suited to various photogrammetry and remote sensing missions. Such platforms are equipped with various optoelectronic sensors imaging in the visible and infrared spectral ranges and also thermal sensors. Nowadays, near-infrared (NIR) images acquired from low altitudes are often used for producing orthophoto maps for precision agriculture among other things. One major problem results from the application of low-cost custom and compact NIR cameras with wide-angle lenses introducing vignetting. In numerous cases, such cameras acquire low radiometric quality images depending on the lighting conditions. The paper presents a method of radiometric quality assessment of low-altitude NIR imagery data from a custom sensor. The method utilizes statistical analysis of NIR images. The data used for the analyses were acquired from various altitudes in various weather and lighting conditions. An objective NIR imagery quality index was determined as a result of the research. The results obtained using this index enabled the classification of images into three categories: good, medium, and low radiometric quality. The classification makes it possible to determine the a priori error of the acquired images and assess whether a rerun of the photogrammetric flight is necessary.

Enabling CD SEM metrology for 5nm technology node and beyond

NASA Astrophysics Data System (ADS)

Lorusso, Gian Francesco; Ohashi, Takeyoshi; Yamaguchi, Astuko; Inoue, Osamu; Sutani, Takumichi; Horiguchi, Naoto; Bömmels, Jürgen; Wilson, Christopher J.; Briggs, Basoene; Tan, Chi Lim; Raymaekers, Tom; Delhougne, Romain; Van den Bosch, Geert; Di Piazza, Luca; Kar, Gouri Sankar; Furnémont, Arnaud; Fantini, Andrea; Donadio, Gabriele Luca; Souriau, Laurent; Crotti, Davide; Yasin, Farrukh; Appeltans, Raf; Rao, Siddharth; De Simone, Danilo; Rincon Delgadillo, Paulina; Leray, Philippe; Charley, Anne-Laure; Zhou, Daisy; Veloso, Anabela; Collaert, Nadine; Hasumi, Kazuhisa; Koshihara, Shunsuke; Ikota, Masami; Okagawa, Yutaka; Ishimoto, Toru

2017-03-01

The CD SEM (Critical Dimension Scanning Electron Microscope) is one of the main tools used to estimate Critical Dimension (CD) in semiconductor manufacturing nowadays, but, as all metrology tools, it will face considerable challenges to keep up with the requirements of the future technology nodes. The root causes of these challenges are not uniquely related to the shrinking CD values, as one might expect, but to the increase in complexity of the devices in terms of morphology and chemical composition as well. In fact, complicated threedimensional device architectures, high aspect ratio features, and wide variety of materials are some of the unavoidable characteristics of the future metrology nodes. This means that, beside an improvement in resolution, it is critical to develop a CD SEM metrology capable of satisfying the specific needs of the devices of the nodes to come, needs that sometimes will have to be addressed through dramatic changes in approach with respect to traditional CD SEM metrology. In this paper, we report on the development of advanced CD SEM metrology at imec on a variety of device platform and processes, for both logic and memories. We discuss newly developed approaches for standard, IIIV, and germanium FinFETs (Fin Field Effect Transistors), for lateral and vertical nanowires (NW), 3D NAND (three-dimensional NAND), STT-MRAM (Spin Transfer Magnetic Torque Random-Access Memory), and ReRAM (Resistive Random Access Memory). Applications for both front-end of line (FEOL) and back-end of line (BEOL) are developed. In terms of process, S/D Epi (Source Drain Epitaxy), SAQP (Self-Aligned Quadruple Patterning), DSA (Dynamic Self-Assembly), and EUVL (Extreme Ultraviolet Lithography) have been used. The work reported here has been performed on Hitachi CG5000, CG6300, and CV5000. In terms of logic, we discuss here the S/D epi defect classification, the metrology optimization for STI (Shallow Trench Isolation) Ge FinFETs, the defectivity of III-V STI Fin

Metrology Laboratory | Energy Systems Integration Facility | NREL

Science.gov Websites

and artificial) Spectral reflectance and transmission of materials (functional check only , pyrheliometers,* pyranometers,* and pyrgeometers. The Metrology Laboratory provides National Institute of

Consultative Committee on Ionizing Radiation: Impact on Radionuclide Metrology

PubMed Central

Karam, L.R.; Ratel, G.

2016-01-01

In response to the CIPM MRA, and to improve radioactivity measurements in the face of advancing technologies, the CIPM’s consultative committee on ionizing radiation developed a strategic approach to the realization and validation of measurement traceability for radionuclide metrology. As a consequence, measurement institutions throughout the world have devoted no small effort to establish radionuclide metrology capabilities, supported by active quality management systems and validated through prioritized participation in international comparisons, providing a varied stakeholder community with measurement confidence. PMID:26688351

Unmanned Aerial Survey of Elephants

PubMed Central

Vermeulen, Cédric; Lejeune, Philippe; Lisein, Jonathan; Sawadogo, Prosper; Bouché, Philippe

2013-01-01

The use of a UAS (Unmanned Aircraft System) was tested to survey large mammals in the Nazinga Game Ranch in the south of Burkina Faso. The Gatewing ×100™ equipped with a Ricoh GR III camera was used to test animal reaction as the UAS passed, and visibility on the images. No reaction was recorded as the UAS passed at a height of 100 m. Observations, made on a set of more than 7000 images, revealed that only elephants (Loxodonta africana) were easily visible while medium and small sized mammals were not. The easy observation of elephants allows experts to enumerate them on images acquired at a height of 100 m. We, therefore, implemented an aerial strip sample count along transects used for the annual wildlife foot count. A total of 34 elephants were recorded on 4 transects, each overflown twice. The elephant density was estimated at 2.47 elephants/km2 with a coefficient of variation (CV%) of 36.10%. The main drawback of our UAS was its low autonomy (45 min). Increased endurance of small UAS is required to replace manned aircraft survey of large areas (about 1000 km of transect per day vs 40 km for our UAS). The monitoring strategy should be adapted according to the sampling plan. Also, the UAS is as expensive as a second-hand light aircraft. However the logistic and flight implementation are easier, the running costs are lower and its use is safer. Technological evolution will make civil UAS more efficient, allowing them to compete with light aircraft for aerial wildlife surveys. PMID:23405088

2. AERIAL VIEW OF MINUTEMAN SILOS. Low oblique aerial view ...

Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

2. AERIAL VIEW OF MINUTEMAN SILOS. Low oblique aerial view (original in color) of the two launch silos, covered. - Edwards Air Force Base, Air Force Rocket Propulsion Laboratory, Missile Silo Type, Test Area 1-100, northeast end of Test Area 1-100 Road, Boron, Kern County, CA

Scanner focus metrology and control system for advanced 10nm logic node

NASA Astrophysics Data System (ADS)

Oh, Junghun; Maeng, Kwang-Seok; Shin, Jae-Hyung; Choi, Won-Woong; Won, Sung-Keun; Grouwstra, Cedric; El Kodadi, Mohamed; Heil, Stephan; van der Meijden, Vidar; Hong, Jong Kyun; Kim, Sang-Jin; Kwon, Oh-Sung

2018-03-01

Immersion lithography is being extended beyond the 10-nm node and the lithography performance requirement needs to be tightened further to ensure good yield. Amongst others, good on-product focus control with accurate and dense metrology measurements is essential to enable this. In this paper, we will present new solutions that enable onproduct focus monitoring and control (mean and uniformity) suitable for high volume manufacturing environment. We will introduce the concept of pure focus and its role in focus control through the imaging optimizer scanner correction interface. The results will show that the focus uniformity can be improved by up to 25%.

Absolute optical metrology : nanometers to kilometers

NASA Technical Reports Server (NTRS)

Dubovitsky, Serge; Lay, O. P.; Peters, R. D.; Liebe, C. C.

2005-01-01

We provide and overview of the developments in the field of high-accuracy absolute optical metrology with emphasis on space-based applications. Specific work on the Modulation Sideband Technology for Absolute Ranging (MSTAR) sensor is described along with novel applications of the sensor.

In-field Raman amplification on coherent optical fiber links for frequency metrology.

PubMed

Clivati, C; Bolognini, G; Calonico, D; Faralli, S; Mura, A; Levi, F

2015-04-20

Distributed Raman amplification (DRA) is widely exploited for the transmission of broadband, modulated signals used in data links, but not yet in coherent optical links for frequency metrology, where the requirements are rather different. After preliminary tests on fiber spools, in this paper we deeper investigate Raman amplification on deployed in-field optical metrological links. We actually test a Doppler-stabilized optical link both on a 94 km-long metro-network implementation with multiplexed ITU data channels and on a 180 km-long dedicated fiber haul connecting two cities, where DRA is employed in combination with Erbium-doped fiber amplification (EDFA). The performance of DRA is detailed in both experiments, indicating that it does not introduce noticeable penalties for the metrological signal or for the ITU data channels. We hence show that Raman amplification of metrological signals can be compatible with a wavelength division multiplexing architecture and that it can be used as an alternative or in combination with dedicated bidirectional EDFAs. No deterioration is noticed in the coherence properties of the delivered signal, which attains frequency instability at the 10(-19) level in both cases. This study can be of interest also in view of the undergoing deployment of continental fiber networks for frequency metrology.

Metrology Optical Power Budgeting in SIM Using Statistical Analysis Techniques

NASA Technical Reports Server (NTRS)

Kuan, Gary M

2008-01-01

The Space Interferometry Mission (SIM) is a space-based stellar interferometry instrument, consisting of up to three interferometers, which will be capable of micro-arc second resolution. Alignment knowledge of the three interferometer baselines requires a three-dimensional, 14-leg truss with each leg being monitored by an external metrology gauge. In addition, each of the three interferometers requires an internal metrology gauge to monitor the optical path length differences between the two sides. Both external and internal metrology gauges are interferometry based, operating at a wavelength of 1319 nanometers. Each gauge has fiber inputs delivering measurement and local oscillator (LO) power, split into probe-LO and reference-LO beam pairs. These beams experience power loss due to a variety of mechanisms including, but not restricted to, design efficiency, material attenuation, element misalignment, diffraction, and coupling efficiency. Since the attenuation due to these sources may degrade over time, an accounting of the range of expected attenuation is needed so an optical power margin can be book kept. A method of statistical optical power analysis and budgeting, based on a technique developed for deep space RF telecommunications, is described in this paper and provides a numerical confidence level for having sufficient optical power relative to mission metrology performance requirements.

Method of transmission of dynamic multibit digital images from micro-unmanned aerial vehicles

NASA Astrophysics Data System (ADS)

Petrov, E. P.; Kharina, N. L.

2018-01-01

In connection with successful usage of nanotechnologies in remote sensing great attention is paid to the systems in micro-unmanned aerial vehicles (MUAVs) capable to provide high spatial resolution of dynamic multibit digital images (MDI). Limited energy resources on board the MUAV do not allow transferring a large amount of video information in the shortest possible time. It keeps back the broad development of MUAV. The search for methods to shorten the transmission time of dynamic MDIs from MUAV over the radio channel leads to the methods of MDI compression without computational operations onboard the MUAV. The known compression codecs of video information can not be applied because of the limited energy resources. In this paper we propose a method for reducing the transmission time of dynamic MDIs without computational operations and distortions onboard the MUAV. To develop the method a mathematical apparatus of the theory of conditional Markov processes with discrete arguments was used. On its basis a mathematical model for the transformation of the MDI represented by binary images (BI) in the MDI, consisting of groups of neighboring BIs (GBI) transmitted by multiphase (MP) signals, is constructed. The algorithm for multidimensional nonlinear filtering of MP signals is synthesized, realizing the statistical redundancy of the MDI to compensate for the noise stability losses caused by the use of MP signals.

Extraction of Dems and Orthoimages from Archive Aerial Imagery to Support Project Planning in Civil Engineering

NASA Astrophysics Data System (ADS)

Cogliati, M.; Tonelli, E.; Battaglia, D.; Scaioni, M.

2017-12-01

Archive aerial photos represent a valuable heritage to provide information about land content and topography in the past years. Today, the availability of low-cost and open-source solutions for photogrammetric processing of close-range and drone images offers the chance to provide outputs such as DEM's and orthoimages in easy way. This paper is aimed at demonstrating somehow and to which level of accuracy digitized archive aerial photos may be used within a such kind of low-cost software (Agisoft Photoscan Professional®) to generate photogrammetric outputs. Different steps of the photogrammetric processing workflow are presented and discussed. The main conclusion is that this procedure may come to provide some final products, which however do not feature the high accuracy and resolution that may be obtained using high-end photogrammetric software packages specifically designed for aerial survey projects. In the last part a case study is presented about the use of four-epoch archive of aerial images to analyze the area where a tunnel has to be excavated.

Control of a Quadcopter Aerial Robot Using Optic Flow Sensing

NASA Astrophysics Data System (ADS)

Hurd, Michael Brandon

This thesis focuses on the motion control of a custom-built quadcopter aerial robot using optic flow sensing. Optic flow sensing is a vision-based approach that can provide a robot the ability to fly in global positioning system (GPS) denied environments, such as indoor environments. In this work, optic flow sensors are used to stabilize the motion of quadcopter robot, where an optic flow algorithm is applied to provide odometry measurements to the quadcopter's central processing unit to monitor the flight heading. The optic-flow sensor and algorithm are capable of gathering and processing the images at 250 frames/sec, and the sensor package weighs 2.5 g and has a footprint of 6 cm2 in area. The odometry value from the optic flow sensor is then used a feedback information in a simple proportional-integral-derivative (PID) controller on the quadcopter. Experimental results are presented to demonstrate the effectiveness of using optic flow for controlling the motion of the quadcopter aerial robot. The technique presented herein can be applied to different types of aerial robotic systems or unmanned aerial vehicles (UAVs), as well as unmanned ground vehicles (UGV).

Aerial Explorers and Robotic Ecosystems

NASA Technical Reports Server (NTRS)

Young, Larry A.; Pisanich, Greg

2004-01-01

A unique bio-inspired approach to autonomous aerial vehicle, a.k.a. aerial explorer technology is discussed. The work is focused on defining and studying aerial explorer mission concepts, both as an individual robotic system and as a member of a small robotic "ecosystem." Members of this robotic ecosystem include the aerial explorer, air-deployed sensors and robotic symbiotes, and other assets such as rovers, landers, and orbiters.

Coherence enhanced quantum metrology in a nonequilibrium optical molecule

NASA Astrophysics Data System (ADS)

Wang, Zhihai; Wu, Wei; Cui, Guodong; Wang, Jin

2018-03-01

We explore the quantum metrology in an optical molecular system coupled to two environments with different temperatures, using a quantum master equation beyond secular approximation. We discover that the steady-state coherence originating from and sustained by the nonequilibrium condition can enhance quantum metrology. We also study the quantitative measures of the nonequilibrium condition in terms of the curl flux, heat current and entropy production at the steady state. They are found to grow with temperature difference. However, an apparent paradox arises considering the contrary behaviors of the steady-state coherence and the nonequilibrium measures in relation to the inter-cavity coupling strength. This paradox is resolved by decomposing the heat current into a population part and a coherence part. Only the latter, the coherence part of the heat current, is tightly connected to the steady-state coherence and behaves similarly with respect to the inter-cavity coupling strength. Interestingly, the coherence part of the heat current flows from the low-temperature reservoir to the high-temperature reservoir, opposite to the direction of the population heat current. Our work offers a viable way to enhance quantum metrology for open quantum systems through steady-state coherence sustained by the nonequilibrium condition, which can be controlled and manipulated to maximize its utility. The potential applications go beyond quantum metrology and extend to areas such as device designing, quantum computation and quantum technology in general.

Mycotoxin metrology: Gravimetric production of zearalenone calibration solution

NASA Astrophysics Data System (ADS)

Rego, E. C. P.; Simon, M. E.; Li, Xiuqin; Li, Xiaomin; Daireaux, A.; Choteau, T.; Westwood, S.; Josephs, R. D.; Wielgosz, R. I.; Cunha, V. S.

2018-03-01

Food safety is a major concern for countries developing metrology and quality assurance systems, including the contamination of food and feed by mycotoxins. To improve the mycotoxin analysis and ensure the metrological traceability, CRM of calibration solution should be used. The production of certified mycotoxin solutions is a major challenge due to the limited amount of standard for conducting a proper purity study and due to the cost of standards. The CBKT project was started at BIPM and Inmetro produced gravimetrically one batch of zearelenone in acetronitrile (14.708 ± 0.016 μg/g, k=2) and conducted homogeneity, stability and value assignment studies.

Sub-50 nm metrology on extreme ultra violet chemically amplified resist—A systematic assessment

DOE Office of Scientific and Technical Information (OSTI.GOV)

Maas, D. J., E-mail: diederik.maas@tno.nl; Herfst, R.; Veldhoven, E. van

2015-10-15

With lithographic patterning dimensions decreasing well below 50 nm, it is of high importance to understand metrology at such small scales. This paper presents results obtained from dense arrays of contact holes (CHs) with various Critical Dimension (CD) between 15 and 50 nm, as patterned in a chemically amplified resist using an ASML EUV scanner and measured at ASML and TNO. To determine the differences between various (local) CD metrology techniques, we conducted an experiment using optical scatterometry, CD-Scanning Electron Microscopy (CD-SEM), Helium ion Microscopy (HIM), and Atomic Force Microscopy (AFM). CD-SEM requires advanced beam scan strategies to mitigate samplemore » charging; the other tools did not need that. We discuss the observed main similarities and differences between the various techniques. To this end, we assessed the spatial frequency content in the raw images for SEM, HIM, and AFM. HIM and AFM resolve the highest spatial frequencies, which are attributed to the more localized probe-sample interaction for these techniques. Furthermore, the SEM, HIM, and AFM waveforms are analyzed in detail. All techniques show good mutual correlation, albeit the reported CD values systematically differ significantly. HIM systematically reports a 25% higher CD uniformity number than CD-SEM for the same arrays of CHs, probably because HIM has a higher resolution than the CD-SEM used in this assessment. A significant speed boost for HIM and AFM is required before these techniques are to serve the demanding industrial metrology applications like optical critical dimension and CD-SEM do nowadays.« less

Sub-50 nm metrology on extreme ultra violet chemically amplified resist—A systematic assessment

NASA Astrophysics Data System (ADS)

Maas, D. J.; Fliervoet, T.; Herfst, R.; van Veldhoven, E.; Meessen, J.; Vaenkatesan, V.; Sadeghian, H.

2015-10-01

With lithographic patterning dimensions decreasing well below 50 nm, it is of high importance to understand metrology at such small scales. This paper presents results obtained from dense arrays of contact holes (CHs) with various Critical Dimension (CD) between 15 and 50 nm, as patterned in a chemically amplified resist using an ASML EUV scanner and measured at ASML and TNO. To determine the differences between various (local) CD metrology techniques, we conducted an experiment using optical scatterometry, CD-Scanning Electron Microscopy (CD-SEM), Helium ion Microscopy (HIM), and Atomic Force Microscopy (AFM). CD-SEM requires advanced beam scan strategies to mitigate sample charging; the other tools did not need that. We discuss the observed main similarities and differences between the various techniques. To this end, we assessed the spatial frequency content in the raw images for SEM, HIM, and AFM. HIM and AFM resolve the highest spatial frequencies, which are attributed to the more localized probe-sample interaction for these techniques. Furthermore, the SEM, HIM, and AFM waveforms are analyzed in detail. All techniques show good mutual correlation, albeit the reported CD values systematically differ significantly. HIM systematically reports a 25% higher CD uniformity number than CD-SEM for the same arrays of CHs, probably because HIM has a higher resolution than the CD-SEM used in this assessment. A significant speed boost for HIM and AFM is required before these techniques are to serve the demanding industrial metrology applications like optical critical dimension and CD-SEM do nowadays.

XPS-XRF hybrid metrology enabling FDSOI process

NASA Astrophysics Data System (ADS)

Hossain, Mainul; Subramanian, Ganesh; Triyoso, Dina; Wahl, Jeremy; Mcardle, Timothy; Vaid, Alok; Bello, A. F.; Lee, Wei Ti; Klare, Mark; Kwan, Michael; Pois, Heath; Wang, Ying; Larson, Tom

2016-03-01

Planar fully-depleted silicon-on-insulator (FDSOI) technology potentially offers comparable transistor performance as FinFETs. pFET FDOSI devices are based on a silicon germanium (cSiGe) layer on top of a buried oxide (BOX). Ndoped interfacial layer (IL), high-k (HfO2) layer and the metal gate stacks are then successively built on top of the SiGe layer. In-line metrology is critical in precisely monitoring the thickness and composition of the gate stack and associated underlying layers in order to achieve desired process control. However, any single in-line metrology technique is insufficient to obtain the thickness of IL, high-k, cSiGe layers in addition to Ge% and N-dose in one single measurement. A hybrid approach is therefore needed that combines the capabilities of more than one measurement technique to extract multiple parameters in a given film stack. This paper will discuss the approaches, challenges, and results associated with the first-in-industry implementation of XPS-XRF hybrid metrology for simultaneous detection of high-k thickness, IL thickness, N-dose, cSiGe thickness and %Ge, all in one signal measurement on a FDSOI substrate in a manufacturing fab. Strong correlation to electrical data for one or more of these measured parameters will also be presented, establishing the reliability of this technique.

Digital terrain modelling and industrial surface metrology - Converging crafts

USGS Publications Warehouse

Pike, R.J.

2001-01-01

Quantitative characterisation of surface form, increasingly from digital 3-D height data, is cross-disciplinary and can be applied at any scale. Thus, separation of industrial-surface metrology from its Earth-science counterpart, (digital) terrain modelling, is artificial. Their growing convergence presents an opportunity to develop in surface morphometry a unified approach to surface representation. This paper introduces terrain modelling and compares it with metrology, noting their differences and similarities. Examples of potential redundancy among parameters illustrate one of the many issues common to both disciplines. ?? 2001 Elsevier Science Ltd. All rights reserved.

Implementation of an IMU Aided Image Stacking Algorithm in a Digital Camera for Unmanned Aerial Vehicles

PubMed Central

Audi, Ahmad; Pierrot-Deseilligny, Marc; Meynard, Christophe

2017-01-01

Images acquired with a long exposure time using a camera embedded on UAVs (Unmanned Aerial Vehicles) exhibit motion blur due to the erratic movements of the UAV. The aim of the present work is to be able to acquire several images with a short exposure time and use an image processing algorithm to produce a stacked image with an equivalent long exposure time. Our method is based on the feature point image registration technique. The algorithm is implemented on the light-weight IGN (Institut national de l’information géographique) camera, which has an IMU (Inertial Measurement Unit) sensor and an SoC (System on Chip)/FPGA (Field-Programmable Gate Array). To obtain the correct parameters for the resampling of the images, the proposed method accurately estimates the geometrical transformation between the first and the N-th images. Feature points are detected in the first image using the FAST (Features from Accelerated Segment Test) detector, then homologous points on other images are obtained by template matching using an initial position benefiting greatly from the presence of the IMU sensor. The SoC/FPGA in the camera is used to speed up some parts of the algorithm in order to achieve real-time performance as our ultimate objective is to exclusively write the resulting image to save bandwidth on the storage device. The paper includes a detailed description of the implemented algorithm, resource usage summary, resulting processing time, resulting images and block diagrams of the described architecture. The resulting stacked image obtained for real surveys does not seem visually impaired. An interesting by-product of this algorithm is the 3D rotation estimated by a photogrammetric method between poses, which can be used to recalibrate in real time the gyrometers of the IMU. Timing results demonstrate that the image resampling part of this algorithm is the most demanding processing task and should also be accelerated in the FPGA in future work. PMID:28718788

Implementation of an IMU Aided Image Stacking Algorithm in a Digital Camera for Unmanned Aerial Vehicles.

PubMed

Audi, Ahmad; Pierrot-Deseilligny, Marc; Meynard, Christophe; Thom, Christian

2017-07-18

Images acquired with a long exposure time using a camera embedded on UAVs (Unmanned Aerial Vehicles) exhibit motion blur due to the erratic movements of the UAV. The aim of the present work is to be able to acquire several images with a short exposure time and use an image processing algorithm to produce a stacked image with an equivalent long exposure time. Our method is based on the feature point image registration technique. The algorithm is implemented on the light-weight IGN (Institut national de l'information géographique) camera, which has an IMU (Inertial Measurement Unit) sensor and an SoC (System on Chip)/FPGA (Field-Programmable Gate Array). To obtain the correct parameters for the resampling of the images, the proposed method accurately estimates the geometrical transformation between the first and the N -th images. Feature points are detected in the first image using the FAST (Features from Accelerated Segment Test) detector, then homologous points on other images are obtained by template matching using an initial position benefiting greatly from the presence of the IMU sensor. The SoC/FPGA in the camera is used to speed up some parts of the algorithm in order to achieve real-time performance as our ultimate objective is to exclusively write the resulting image to save bandwidth on the storage device. The paper includes a detailed description of the implemented algorithm, resource usage summary, resulting processing time, resulting images and block diagrams of the described architecture. The resulting stacked image obtained for real surveys does not seem visually impaired. An interesting by-product of this algorithm is the 3D rotation estimated by a photogrammetric method between poses, which can be used to recalibrate in real time the gyrometers of the IMU. Timing results demonstrate that the image resampling part of this algorithm is the most demanding processing task and should also be accelerated in the FPGA in future work.

14. Aerial view showing bldg grouping with bldg #2 intact ...

Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

14. Aerial view showing bldg grouping with bldg #2 intact previous to fire (long pitched roof with 7 distinct dormers near image center) - photo by Eastern Topographics, Wolfeboro, N.H., Sept. 1985 - Lawrence Machine Shop, Building No. 2, Union & Canal Streets, Lawrence, Essex County, MA

3D interconnect metrology in CMS/ITRI

NASA Astrophysics Data System (ADS)

Ku, Y. S.; Shyu, D. M.; Hsu, W. T.; Chang, P. Y.; Chen, Y. C.; Pang, H. L.

2011-05-01

Semiconductor device packaging technology is rapidly advancing, in response to the demand for thinner and smaller electronic devices. Three-dimensional chip/wafer stacking that uses through-silicon vias (TSV) is a key technical focus area, and the continuous development of this novel technology has created a need for non-contact characterization. Many of these challenges are novel to the industry due to the relatively large variety of via sizes and density, and new processes such as wafer thinning and stacked wafer bonding. This paper summarizes the developing metrology that has been used during via-middle & via-last TSV process development at EOL/ITRI. While there is a variety of metrology and inspection applications for 3D interconnect processing, the main topics covered here are via CD/depth measurement, thinned wafer inspection and wafer warpage measurement.

Semi-automted analysis of high-resolution aerial images to quantify docks in Upper Midwest glacial lakes

USGS Publications Warehouse

Beck, Marcus W.; Vondracek, Bruce C.; Hatch, Lorin K.; Vinje, Jason

2013-01-01

Lake resources can be negatively affected by environmental stressors originating from multiple sources and different spatial scales. Shoreline development, in particular, can negatively affect lake resources through decline in habitat quality, physical disturbance, and impacts on fisheries. The development of remote sensing techniques that efficiently characterize shoreline development in a regional context could greatly improve management approaches for protecting and restoring lake resources. The goal of this study was to develop an approach using high-resolution aerial photographs to quantify and assess docks as indicators of shoreline development. First, we describe a dock analysis workflow that can be used to quantify the spatial extent of docks using aerial images. Our approach incorporates pixel-based classifiers with object-based techniques to effectively analyze high-resolution digital imagery. Second, we apply the analysis workflow to quantify docks for 4261 lakes managed by the Minnesota Department of Natural Resources. Overall accuracy of the analysis results was 98.4% (87.7% based on ) after manual post-processing. The analysis workflow was also 74% more efficient than the time required for manual digitization of docks. These analyses have immediate relevance for resource planning in Minnesota, whereas the dock analysis workflow could be used to quantify shoreline development in other regions with comparable imagery. These data can also be used to better understand the effects of shoreline development on aquatic resources and to evaluate the effects of shoreline development relative to other stressors.

Aerial photo SBVC1962". Photo no. 360. Low oblique aerial view ...

Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

Aerial photo -SBVC-1962". Photo no. 360. Low oblique aerial view of the campus, looking southeast. Stamped on the rear: "Ron Wilhite, Sun-Telegram photo, file, 10/22/62/ - San Bernardino Valley College, 701 South Mount Vernon Avenue, San Bernardino, San Bernardino County, CA

PREFACE: Fundamental Constants in Physics and Metrology

NASA Astrophysics Data System (ADS)

Klose, Volkmar; Kramer, Bernhard

1986-01-01

This volume contains the papers presented at the 70th PTB Seminar which, the second on the subject "Fundamental Constants in Physics and Metrology", was held at the Physikalisch-Technische Bundesanstalt in Braunschweig from October 21 to 22, 1985. About 100 participants from the universities and various research institutes of the Federal Republic of Germany participated in the meeting. Besides a number of review lectures on various broader subjects there was a poster session which contained a variety of topical contributed papers ranging from the theory of the quantum Hall effect to reports on the status of the metrological experiments at the PTB. In addition, the participants were also offered the possibility to visit the PTB laboratories during the course of the seminar. During the preparation of the meeting we noticed that even most of the general subjects which were going to be discussed in the lectures are of great importance in connection with metrological experiments and should be made accessible to the scientific community. This eventually resulted in the idea of the publication of the papers in a regular journal. We are grateful to the editor of Metrologia for providing this opportunity. We have included quite a number of papers from basic physical research. For example, certain aspects of high-energy physics and quantum optics, as well as the many-faceted role of Sommerfeld's fine-structure constant, are covered. We think that questions such as "What are the intrinsic fundamental parameters of nature?" or "What are we doing when we perform an experiment?" can shed new light on the art of metrology, and do, potentially, lead to new ideas. This appears to be especially necessary when we notice the increasing importance of the role of the fundamental constants and macroscopic quantum effects for the definition and the realization of the physical units. In some cases we have reached a point where the limitations of our knowledge of a fundamental constant and

Toward Advancing Nano-Object Count Metrology: A Best Practice Framework

PubMed Central

Boyko, Volodymyr; Meyers, Greg; Voetz, Matthias; Wohlleben, Wendel

2013-01-01

Background: A movement among international agencies and policy makers to classify industrial materials by their number content of sub–100-nm particles could have broad implications for the development of sustainable nanotechnologies. Objectives: Here we highlight current particle size metrology challenges faced by the chemical industry due to these emerging number percent content thresholds, provide a suggested best-practice framework for nano-object identification, and identify research needs as a path forward. Discussion: Harmonized methods for identifying nanomaterials by size and count for many real-world samples do not currently exist. Although particle size remains the sole discriminating factor for classifying a material as “nano,” inconsistencies in size metrology will continue to confound policy and decision making. Moreover, there are concerns that the casting of a wide net with still-unproven metrology methods may stifle the development and judicious implementation of sustainable nanotechnologies. Based on the current state of the art, we propose a tiered approach for evaluating materials. To enable future risk-based refinements of these emerging definitions, we recommend that this framework also be considered in environmental and human health research involving the implications of nanomaterials. Conclusion: Substantial scientific scrutiny is needed in the area of nanomaterial metrology to establish best practices and to develop suitable methods before implementing definitions based solely on number percent nano-object content for regulatory purposes. Strong cooperation between industry, academia, and research institutions will be required to fully develop and implement detailed frameworks for nanomaterial identification with respect to emerging count-based metrics. Citation: Brown SC, Boyko V, Meyers G, Voetz M, Wohlleben W. 2013. Toward advancing nano-object count metrology: a best practice framework. Environ Health Perspect 121:1282–1291;�

The future of 2D metrology for display manufacturing

NASA Astrophysics Data System (ADS)

Sandstrom, Tor; Wahlsten, Mikael; Park, Youngjin

2016-10-01

The race to 800 PPI and higher in mobile devices and the transition to OLED displays are driving a dramatic development of mask quality: resolution, CDU, registration, and complexity. 2D metrology for large area masks is necessary and must follow the roadmap. Driving forces in the market place point to continued development of even more dense displays. State-of-the-art metrology has proven itself capable of overlay below 40 nm and registration below 65 nm for G6 masks. Future developments include incoming and recurrent measurements of pellicalized masks at the panel maker's factory site. Standardization of coordinate systems across supplier networks is feasible. This will enable better yield and production economy for both mask and panel maker. Better distortion correction methods will give better registration on the panels and relax the flatness requirements of the mask blanks. If panels are measured together with masks and the results are used to characterize the aligners, further quality and yield improvements are possible. Possible future developments include in-cell metrology and integration with other instruments in the same platform.

Metrology requirements for the serial production of ELT primary mirror segments

NASA Astrophysics Data System (ADS)

Rees, Paul C. T.; Gray, Caroline

2015-08-01

The manufacture of the next generation of large astronomical telescopes, the extremely large telescopes (ELT), requires the rapid manufacture of greater than 500 1.44m hexagonal segments for the primary mirror of each telescope. Both leading projects, the Thirty Meter Telescope (TMT) and the European Extremely Large Telescope (E-ELT), have set highly demanding technical requirements for each fabricated segment. These technical requirements, when combined with the anticipated construction schedule for each telescope, suggest that more than one optical fabricator will be involved in the delivery of the primary mirror segments in order to meet the project schedule. For one supplier, the technical specification is challenging and requires highly consistent control of metrology in close coordination with the polishing technologies used in order to optimize production rates. For production using multiple suppliers, however the supply chain is structured, consistent control of metrology along the supply chain will be required. This requires a broader pattern of independent verification than is the case of a single supplier. This paper outlines the metrology requirements for a single supplier throughout all stages of the fabrication process. We identify and outline those areas where metrology accuracy and duration have a significant impact on production efficiency. We use the challenging ESO E-ELT technical specification as an example of our treatment, including actual process data. We further develop this model for the case of a supply chain consisting of multiple suppliers. Here, we emphasize the need to control metrology throughout the supply chain in order to optimize net production efficiency.

Metrology to quantify wear and creep of polyethylene tibial knee inserts.

PubMed

Muratoglu, Orhun K; Perinchief, Rebecca S; Bragdon, Charles R; O'Connor, Daniel O; Konrad, Reto; Harris, William H

2003-05-01

Assessment of damage on articular surfaces of ultrahigh molecular weight polyethylene tibial knee inserts primarily has been limited to qualitative methods, such as visual observation and classification of features such as pitting, delamination, and subsurface cracking. Semiquantitative methods also have been proposed to determine the linear penetration and volume of the scar that forms on articular surfaces of tibial knee inserts. The current authors report a new metrologic method that uses a coordinate measuring machine to quantify the dimensions of this scar. The articular surface of the insert is digitized with the coordinate measuring machine before and after regular intervals of testing on a knee simulator. The volume and linear penetration of the scar are calculated by mathematically taking the difference between the digitized surface maps of the worn and unworn articular surfaces. Three conventional polyethylene tibial knee inserts of a posterior cruciate-sparing design were subjected to five million cycles of normal gait on a displacement-driven knee wear simulator in bovine serum. A metrologic method was used to calculate creep and wear contributions to the scar formation on each tibial plateau. Weight loss of the inserts was determined gravimetrically with the appropriate correction for fluid absorption. The total average wear volume was 43 +/- 9 and 41 +/- 4 mm3 measured by the metrologic and gravimetric methods, respectively. The wear rate averaged 8.3 +/- 0.9 and 8.5 +/- 1.6 mm3 per million cycles measured by the metrologic and gravimetric methods, respectively. These comparisons reflected strong agreement between the metrologic and gravimetric methods.

Tunnel profile measurement by vision metrology toward application to NATM

NASA Astrophysics Data System (ADS)

Hattori, Susumu; Akimoto, Keiichi; Ono, Tetsu; Miura, Satoru

2003-05-01

The NATM, a widely used tunnel excavation method, requires precise periodical monitoring of deformations especially at fault zones, which tends to hamper traffics with conventional measurement means. In this paper vision metrology was applied to tunnel profile measurement with a view to developing a new method. Two hundred of Retro-targets are placed on a one-meter spacing lattice at a tunnel site of 7m in diameter and 15m in longitude, and 66 images were taken to cover the target field. The object space coordinates of targets obtained by bundle adjustment were compared with ones obtained by high-precision total station observation. The root mean square (RMS) of differences of coordinates was 0.548mm, which is precise enough for monitoring deformations for the NATM.

Extracting Semantic Building Models from Aerial Stereo Images and Conversion to Citygml

NASA Astrophysics Data System (ADS)

Sengul, A.

2012-07-01

The collection of geographic data is of primary importance for the creation and maintenance of a GIS. Traditionally the acquisition of 3D information has been the task of photogrammetry using aerial stereo images. Digital photogrammetric systems employ sophisticated software to extract digital terrain models or to plot 3D objects. The demand for 3D city models leads to new applications and new standards. City Geography Mark-up Language (CityGML), a concept for modelling and exchange of 3D city and landscape models, defines the classes and relations for the most relevant topographic objects in cities and regional models with respect to their geometrical, topological, semantically and topological properties. It now is increasingly accepted, since it fulfils the prerequisites required e.g. for risk analysis, urban planning, and simulations. There is a need to include existing 3D information derived from photogrammetric processes in CityGML databases. In order to filling the gap, this paper reports on a framework transferring data plotted by Erdas LPS and Stereo Analyst for ArcGIS software to CityGML using Safe Software's Feature Manupulate Engine (FME)

Use of archive aerial photography for monitoring black mangrove populations

USDA-ARS?s Scientific Manuscript database

A study was conducted on the south Texas Gulf Coast to evaluate archive aerial color-infrared (CIR) photography combined with supervised image analysis techniques to quantify changes in black mangrove [Avicennia germinans (L.) L.] populations over a 26-year period. Archive CIR film from two study si...

The coming of age of the first hybrid metrology software platform dedicated to nanotechnologies (Conference Presentation)

NASA Astrophysics Data System (ADS)

Foucher, Johann; Labrosse, Aurelien; Dervillé, Alexandre; Zimmermann, Yann; Bernard, Guilhem; Martinez, Sergio; Grönqvist, Hanna; Baderot, Julien; Pinzan, Florian

2017-03-01

The development and integration of new materials and structures at the nanoscale require multiple parallel characterizations in order to control mostly physico-chemical properties as a function of applications. Among all properties, we can list physical properties such as: size, shape, specific surface area, aspect ratio, agglomeration/aggregation state, size distribution, surface morphology/topography, structure (including crystallinity and defect structure), solubility and chemical properties such as: structural formula/molecular structure, composition (including degree of purity, known impurities or additives), phase identity, surface chemistry (composition, charge, tension, reactive sites, physical structure, photocatalytic properties, zeta potential), hydrophilicity/lipophilicity. Depending on the final material formulation (aerosol, powder, nanostructuration…) and the industrial application (semiconductor, cosmetics, chemistry, automotive…), a fleet of complementary characterization equipments must be used in synergy for accurate process tuning and high production yield. The synergy between equipment so-called hybrid metrology consists in using the strength of each technique in order to reduce the global uncertainty for better and faster process control. The only way to succeed doing this exercise is to use data fusion methodology. In this paper, we will introduce the work that has been done to create the first generic hybrid metrology software platform dedicated to nanotechnologies process control. The first part will be dedicated to process flow modeling that is related to a fleet of metrology tools. The second part will introduce the concept of entity model which describes the various parameters that have to be extracted. The entity model is fed with data analysis as a function of the application (automatic analysis or semi-automated analysis). The final part will introduce two ways of doing data fusion on real data coming from imaging (SEM, TEM, AFM

A decade of innovation with laser speckle metrology

NASA Astrophysics Data System (ADS)

Ettemeyer, Andreas

2003-05-01

Speckle Pattern Interferometry has emerged from the experimental substitution of holographic interferometry to become a powerful problem solving tool in research and industry. The rapid development of computer and digital imaging techniques in combination with minaturization of the optical equipment led to new applications which had not been anticipated before. While classical holographic interferometry had always required careful consideration of the environmental conditions such as vibration, noise, light, etc. and could generally only be performed in the optical laboratory, it is now state of the art, to handle portable speckle measuring equipment at almost any place. During the last decade, the change in design and technique has dramatically influenced the range of applications of speckle metrology and opened new markets. The integration of recent research results into speckle measuring equipment has led to handy equipment, simplified the operation and created high quality data output.

Aerial photography flight quality assessment with GPS/INS and DEM data

NASA Astrophysics Data System (ADS)

Zhao, Haitao; Zhang, Bing; Shang, Jiali; Liu, Jiangui; Li, Dong; Chen, Yanyan; Zuo, Zhengli; Chen, Zhengchao

2018-01-01

The flight altitude, ground coverage, photo overlap, and other acquisition specifications of an aerial photography flight mission directly affect the quality and accuracy of the subsequent mapping tasks. To ensure smooth post-flight data processing and fulfill the pre-defined mapping accuracy, flight quality assessments should be carried out in time. This paper presents a novel and rigorous approach for flight quality evaluation of frame cameras with GPS/INS data and DEM, using geometric calculation rather than image analysis as in the conventional methods. This new approach is based mainly on the collinearity equations, in which the accuracy of a set of flight quality indicators is derived through a rigorous error propagation model and validated with scenario data. Theoretical analysis and practical flight test of an aerial photography mission using an UltraCamXp camera showed that the calculated photo overlap is accurate enough for flight quality assessment of 5 cm ground sample distance image, using the SRTMGL3 DEM and the POSAV510 GPS/INS data. An even better overlap accuracy could be achieved for coarser-resolution aerial photography. With this new approach, the flight quality evaluation can be conducted on site right after landing, providing accurate and timely information for decision making.

Metrological traceability of holmium oxide solution

NASA Astrophysics Data System (ADS)

Gonçalves, D. E. F.; Gomes, J. F. S.; Alvarenga, A. P. D.; Borges, P. P.; Araujo, T. O.

2018-03-01

Holmium oxide solution was prepared as a candidate of certified reference material for spectrophotometer wavelength scale calibration. Here is presented the necessary steps for evaluation of the uncertainty and the establishment of metrological traceability for the production of this material. Preliminary results from the first produced batch are shown.

Issues of Teaching Metrology in Higher Education Institutions of Civil Engineering in Russia

ERIC Educational Resources Information Center

Pukharenko, Yurii Vladimirovich; Norin, Veniamin Aleksandrovich

2017-01-01

The work analyses the training process condition in teaching the discipline "Metrology, Standardization, Certification and Quality Control." It proves that the current educational standard regarding the instruction of the discipline "Metrology, Standardization, Certification and Quality Control" does not meet the needs of the…

Study of Lever-Arm Effect Using Embedded Photogrammetry and On-Board GPS Receiver on Uav for Metrological Mapping Purpose and Proposal of a Free Ground Measurements Calibration Procedure

NASA Astrophysics Data System (ADS)

Daakir, M.; Pierrot-Deseilligny, M.; Bosser, P.; Pichard, F.; Thom, C.; Rabot, Y.

2016-03-01

Nowadays, Unmanned Aerial Vehicle (UAV) on-board photogrammetry knows a significant growth due to the democratization of using drones in the civilian sector. Also, due to changes in regulations laws governing the rules of inclusion of a UAV in the airspace which become suitable for the development of professional activities. Fields of application of photogrammetry are diverse, for instance: architecture, geology, archaeology, mapping, industrial metrology, etc. Our research concerns the latter area. Vinci-Construction- Terrassement is a private company specialized in public earthworks that uses UAVs for metrology applications. This article deals with maximum accuracy one can achieve with a coupled camera and GPS receiver system for direct-georeferencing of Digital Surface Models (DSMs) without relying on Ground Control Points (GCPs) measurements. This article focuses specially on the lever-arm calibration part. This proposed calibration method is based on two steps: a first step involves the proper calibration for each sensor, i.e. to determine the position of the optical center of the camera and the GPS antenna phase center in a local coordinate system relative to the sensor. A second step concerns a 3d modeling of the UAV with embedded sensors through a photogrammetric acquisition. Processing this acquisition allows to determine the value of the lever-arm offset without using GCPs.

Roles of chemical metrology in electronics industry and associated environment in Korea: a tutorial.

PubMed

Kang, Namgoo; Joong Kim, Kyung; Seog Kim, Jin; Hae Lee, Joung

2015-03-01

Chemical metrology is gaining importance in electronics industry that manufactures semiconductors, electronic displays, and microelectronics. Extensive and growing needs from this industry have raised the significance of accurate measurements of the amount of substances and material properties. For the first time, this paper presents information on how chemical metrology is being applied to meet a variety of needs in the aspects of quality control of electronics products and environmental regulations closely associated with electronics industry. For a better understanding of the roles of the chemical metrology within electronics industry, the recent research activities and results in chemical metrology are presented using typical examples in Korea where electronic industry is leading a national economy. Particular attention is paid to the applications of chemical metrology for advancing emerging electronics technology developments. Such examples are a novel technique for the accurate quantification of gas composition at nano-liter levels within a MEMS package, the surface chemical analysis of a semiconductor device. Typical metrological tools are also presented for the development of certified reference materials for fluorinated greenhouse gases and proficiency testing schemes for heavy metals and chlorinated toxic gas in order to cope properly with environmental issues within electronics industry. In addition, a recent technique is presented for the accurate measurement of the destruction and removal efficiency of a typical greenhouse gas scrubber. Copyright © 2014 Elsevier B.V. All rights reserved.

Design and realization of an AEC&AGC system for the CCD aerial camera

NASA Astrophysics Data System (ADS)

Liu, Hai ying; Feng, Bing; Wang, Peng; Li, Yan; Wei, Hao yun

2015-08-01

An AEC and AGC(Automatic Exposure Control and Automatic Gain Control) system was designed for a CCD aerial camera with fixed aperture and electronic shutter. The normal AEC and AGE algorithm is not suitable to the aerial camera since the camera always takes high-resolution photographs in high-speed moving. The AEC and AGE system adjusts electronic shutter and camera gain automatically according to the target brightness and the moving speed of the aircraft. An automatic Gamma correction is used before the image is output so that the image is better for watching and analyzing by human eyes. The AEC and AGC system could avoid underexposure, overexposure, or image blurring caused by fast moving or environment vibration. A series of tests proved that the system meet the requirements of the camera system with its fast adjusting speed, high adaptability, high reliability in severe complex environment.

Metrology Mount and Optics Mandrels

NASA Technical Reports Server (NTRS)

Tananbaum, H.; Russell, Kevin (Technical Monitor)

2000-01-01

This document is the Final Report for NASA Grant NAG8-1198 from NASA Marshall Space Flight Center (MSFC) to the Smithsonian Astrophysical Observatory (SAO). The Grant is entitled "Metrology Mount and Optics Materials." This final report is required by the terms of the Grant. The period of performance was from September 15, 1995 through January 14, 1999. Total funding received by SAO from MSFC for this effort was, $254,000. Mr. Lester Cohen carried out most of the work at SAO, but received limited support from other engineers, technicians, and designers. Dr. Harvey Tananbaum, the Principal Investigator for the grant provided overall direction and work- assessment. The Grant has had two funding augmentations to its basic amount and has, over time, emphasized three different research areas - each of which has been an extension of earlier research. The research activity was in 2 areas: (1) Expert opto-structural studies related to separation mechanics and effects of electro formed nickel X-ray mirrors. and (2) Design, fabrication and evaluation of a low force metrology and assembly station for light weight full shell electroformed X-ray mirrors.

Metrology laboratory requirements for third-generation synchrotron radiation sources

DOE Office of Scientific and Technical Information (OSTI.GOV)

Takacs, P.Z.; Quian, Shinan

1997-11-01

New third-generation synchrotron radiation sources that are now, or will soon, come on line will need to decide how to handle the testing of optical components delivered for use in their beam lines. In many cases it is desirable to establish an in-house metrology laboratory to do the work. We review the history behind the formation of the Optical Metrology Laboratory at Brookhaven National Laboratory and the rationale for its continued existence. We offer suggestions to those who may be contemplating setting up similar facilities, based on our experiences over the past two decades.

Speckle-based at-wavelength metrology of X-ray mirrors with super accuracy

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kashyap, Yogesh; Wang, Hongchang; Sawhney, Kawal, E-mail: kawal.sawhney@diamond.ac.uk

2016-05-15

X-ray active mirrors, such as bimorph and mechanically bendable mirrors, are increasingly being used on beamlines at modern synchrotron source facilities to generate either focused or “tophat” beams. As well as optical tests in the metrology lab, it is becoming increasingly important to optimise and characterise active optics under actual beamline operating conditions. Recently developed X-ray speckle-based at-wavelength metrology technique has shown great potential. The technique has been established and further developed at the Diamond Light Source and is increasingly being used to optimise active mirrors. Details of the X-ray speckle-based at-wavelength metrology technique and an example of its applicabilitymore » in characterising and optimising a micro-focusing bimorph X-ray mirror are presented. Importantly, an unprecedented angular sensitivity in the range of two nanoradians for measuring the slope error of an optical surface has been demonstrated. Such a super precision metrology technique will be beneficial to the manufacturers of polished mirrors and also in optimization of beam shaping during experiments.« less

Earth analog image digitization of field, aerial, and lab experiment studies for Planetary Data System archiving.

NASA Astrophysics Data System (ADS)

Williams, D. A.; Nelson, D. M.

2017-12-01

A portion of the earth analog image archive at the Ronald Greeley Center for Planetary Studies (RGCPS)-the NASA Regional Planetary Information Facility at Arizona State University-is being digitized and will be added to the Planetary Data System (PDS) for public use. This will be a first addition of terrestrial data to the PDS specifically for comparative planetology studies. Digitization is separated into four tasks. First is the scanning of aerial photographs of volcanic and aeolian structures and flows. The second task is to scan field site images taken from ground and low-altitude aircraft of volcanic structures, lava flows, lava tubes, dunes, and wind streaks. The third image set to be scanned includes photographs of lab experiments from the NASA Planetary Aeolian Laboratory wind tunnels, vortex generator, and of wax models. Finally, rare NASA documents are being scanned and formatted as PDF files. Thousands of images are to be scanned for this project. Archiving of the data will follow the PDS4 standard, where the entire project is classified as a single bundle, with individual subjects (i.e., the Amboy Crater volcanic structure in the Mojave Desert of California) as collections. Within the collections, each image is considered a product, with a unique ID and associated XML document. Documents describing the image data, including the subject and context, will be included with each collection. Once complete, the data will be hosted by a PDS data node and available for public search and download. As one of the first earth analog datasets to be archived by the PDS, this project could prompt the digitizing and making available of historic datasets from other facilities for the scientific community.

Fabrication and metrology of lithium niobate narrowband optical filters for the solar orbiter

NASA Astrophysics Data System (ADS)

Gensemer, Stephen D.; Farrant, David

2014-06-01

We report on the fabrication of custom voltage tunable etalons for the SO/PHI spaceborne solar imaging instrument [A. Gandorfer, S. K. Solanki, J. Woch, V. M. Pillet, A. A. Herrero, and T. Appourchaux, J. Phys.: Conference Series 271, 012086 (2011)]. The etalons were manufactured to place a transmission maximum within 0.3 Å of the FeI emission line at 6175.0 Å. Meeting this specification requires an overall thickness specified to within ±15 nm, over a 60 mm aperture. We describe here the metrology, modelling and coating procedures we developed to achieve this.

Optimal adaptive control for quantum metrology with time-dependent Hamiltonians.

PubMed

Pang, Shengshi; Jordan, Andrew N

2017-03-09

Quantum metrology has been studied for a wide range of systems with time-independent Hamiltonians. For systems with time-dependent Hamiltonians, however, due to the complexity of dynamics, little has been known about quantum metrology. Here we investigate quantum metrology with time-dependent Hamiltonians to bridge this gap. We obtain the optimal quantum Fisher information for parameters in time-dependent Hamiltonians, and show proper Hamiltonian control is generally necessary to optimize the Fisher information. We derive the optimal Hamiltonian control, which is generally adaptive, and the measurement scheme to attain the optimal Fisher information. In a minimal example of a qubit in a rotating magnetic field, we find a surprising result that the fundamental limit of T 2 time scaling of quantum Fisher information can be broken with time-dependent Hamiltonians, which reaches T 4 in estimating the rotation frequency of the field. We conclude by considering level crossings in the derivatives of the Hamiltonians, and point out additional control is necessary for that case.

DABAM: an open-source database of X-ray mirrors metrology

PubMed Central

Sanchez del Rio, Manuel; Bianchi, Davide; Cocco, Daniele; Glass, Mark; Idir, Mourad; Metz, Jim; Raimondi, Lorenzo; Rebuffi, Luca; Reininger, Ruben; Shi, Xianbo; Siewert, Frank; Spielmann-Jaeggi, Sibylle; Takacs, Peter; Tomasset, Muriel; Tonnessen, Tom; Vivo, Amparo; Yashchuk, Valeriy

2016-01-01

An open-source database containing metrology data for X-ray mirrors is presented. It makes available metrology data (mirror heights and slopes profiles) that can be used with simulation tools for calculating the effects of optical surface errors in the performances of an optical instrument, such as a synchrotron beamline. A typical case is the degradation of the intensity profile at the focal position in a beamline due to mirror surface errors. This database for metrology (DABAM) aims to provide to the users of simulation tools the data of real mirrors. The data included in the database are described in this paper, with details of how the mirror parameters are stored. An accompanying software is provided to allow simple access and processing of these data, calculate the most usual statistical parameters, and also include the option of creating input files for most used simulation codes. Some optics simulations are presented and discussed to illustrate the real use of the profiles from the database. PMID:27140145

World wide matching of registration metrology tools of various generations

NASA Astrophysics Data System (ADS)

Laske, F.; Pudnos, A.; Mackey, L.; Tran, P.; Higuchi, M.; Enkrich, C.; Roeth, K.-D.; Schmidt, K.-H.; Adam, D.; Bender, J.

2008-10-01

Turn around time/cycle time is a key success criterion in the semiconductor photomask business. Therefore, global mask suppliers typically allocate work loads based on fab capability and utilization capacity. From a logistical point of view, the manufacturing location of a photomask should be transparent to the customer (mask user). Matching capability of production equipment and especially metrology tools is considered a key enabler to guarantee cross site manufacturing flexibility. Toppan, with manufacturing sites in eight countries worldwide, has an on-going program to match the registration metrology systems of all its production sites. This allows for manufacturing flexibility and risk mitigation.In cooperation with Vistec Semiconductor Systems, Toppan has recently completed a program to match the Vistec LMS IPRO systems at all production sites worldwide. Vistec has developed a new software feature which allows for significantly improved matching of LMS IPRO(x) registration metrology tools of various generations. We will report on the results of the global matching campaign of several of the leading Toppan sites.

Optimal adaptive control for quantum metrology with time-dependent Hamiltonians

PubMed Central

Pang, Shengshi; Jordan, Andrew N.

2017-01-01

Quantum metrology has been studied for a wide range of systems with time-independent Hamiltonians. For systems with time-dependent Hamiltonians, however, due to the complexity of dynamics, little has been known about quantum metrology. Here we investigate quantum metrology with time-dependent Hamiltonians to bridge this gap. We obtain the optimal quantum Fisher information for parameters in time-dependent Hamiltonians, and show proper Hamiltonian control is generally necessary to optimize the Fisher information. We derive the optimal Hamiltonian control, which is generally adaptive, and the measurement scheme to attain the optimal Fisher information. In a minimal example of a qubit in a rotating magnetic field, we find a surprising result that the fundamental limit of T2 time scaling of quantum Fisher information can be broken with time-dependent Hamiltonians, which reaches T4 in estimating the rotation frequency of the field. We conclude by considering level crossings in the derivatives of the Hamiltonians, and point out additional control is necessary for that case. PMID:28276428

Geodetic glacier mass balances at the push of a button: application of Structure from Motion technology on aerial images in mountain regions

NASA Astrophysics Data System (ADS)

Bolch, T.; Mölg, N.

2017-12-01

The application of Structure-from-Motion (SfM) to generate digital terrain models (DTMs) derived out of images from various kinds of sources has strongly increased in recent years. The major reason for this is its easy-to-use handling in comparison to conventional photogrammetry. In glaciology, DTMs are intensely used, among others, to calculate the geodetic mass balances. Few studies investigated the application of SfM to aerial images in mountainous terrain and results look promising. We tested this technique in a demanding environment in the Swiss Alps including very steep slopes, snow and ice covered terrain. SfM (using the commercial software packages of Agisoft Photoscan and Pix4DMapper) and conventional photogrammetry (ERDAS Photogrammetry) were applied on archival aerial images for nine dates between 1946 and 2005 the results were compared regarding bundle adjustment and final DTM quality. The overall precision of the DTMs could be defined with the use of a modern, high-quality reference DTM by Swisstopo. Results suggest a high performance of SfM to produce DTMs of similar quality as conventional photogrammetry. A ground resolution of high quality (little noise and artefacts) can be up to 50% higher, with 3-6 times less user effort. However, the controls on the commercial SfM software packages are limited in comparison to ERDAS Photogrammetry. SfM performs less reliably when few images with little overlap are processed. Overall, the uncertainty of DTMs from the different software are comparable and mostly within the uncertainty range of the reference DTM, making them highly valuable for glaciological purposes. Even though SfM facilitates the largely automated production of high quality DTMs, the user is not exempt from a thorough quality check, at best with reference data where available.

REMOTE SENSING OF SEAGRASS WITH AVIRIS AND HIGH ALTITUDE AERIAL PHOTOGRAPHY

EPA Science Inventory

On May 15,2002 AVIRlS (Advanced VisuaJ/lnfrared Imaging Spectrometer) data and high altitude aerial photographs were acquired tor coastal .waters from Cape Lookout to Oregon Inlet, North Carolina. The study encompasses extensive areas of seagrass, federally protected submersed, r...

Entanglement-seeded, dual, optical parametric amplification: Applications to quantum imaging and metrology

NASA Astrophysics Data System (ADS)

Glasser, Ryan T.; Cable, Hugo; Dowling, Jonathan P.; de Martini, Francesco; Sciarrino, Fabio; Vitelli, Chiara

2008-07-01

The study of optical parametric amplifiers (OPAs) has been successful in describing and creating nonclassical light for use in fields such as quantum metrology and quantum lithography [Agarwal , J. Opt. Soc. Am. B 24, 2 (2007)]. In this paper we present the theory of an OPA scheme utilizing an entangled state input. The scheme involves two identical OPAs seeded with the maximally path-entangled ∣N00N⟩ state (∣2,0⟩+∣0,2⟩)/2 . The stimulated amplification results in output state probability amplitudes that have a dependence on the number of photons in each mode, which differs greatly from two-mode squeezed vacuum. A large family of entangled output states are found. Specific output states allow for the heralded creation of N=4 N00N states, which may be used for quantum lithography, to write sub-Rayleigh fringe patterns, and for quantum interferometry, to achieve Heisenberg-limited phase measurement sensitivity.

A fast double shutter for CCD-based metrology

NASA Astrophysics Data System (ADS)

Geisler, R.

2017-02-01

Image based metrology such as Particle Image Velocimetry (PIV) depends on the comparison of two images of an object taken in fast succession. Cameras for these applications provide the so-called `double shutter' mode: One frame is captured with a short exposure time and in direct succession a second frame with a long exposure time can be recorded. The difference in the exposure times is typically no problem since illumination is provided by a pulsed light source such as a laser and the measurements are performed in a darkened environment to prevent ambient light from accumulating in the long second exposure time. However, measurements of self-luminous processes (e.g. plasma, combustion ...) as well as experiments in ambient light are difficult to perform and require special equipment (external shutters, highspeed image sensors, multi-sensor systems ...). Unfortunately, all these methods incorporate different drawbacks such as reduced resolution, degraded image quality, decreased light sensitivity or increased susceptibility to decalibration. In the solution presented here, off-the-shelf CCD sensors are used with a special timing to combine neighbouring pixels in a binning-like way. As a result, two frames of short exposure time can be captured in fast succession. They are stored in the on-chip vertical register in a line-interleaved pattern, read out in the common way and separated again by software. The two resultant frames are completely congruent; they expose no insensitive lines or line shifts and thus enable sub-pixel accurate measurements. A third frame can be captured at the full resolution analogue to the double shutter technique. Image based measurement techniques such as PIV can benefit from this mode when applied in bright environments. The third frame is useful e.g. for acceleration measurements or for particle tracking applications.

AERIAL MEASURING SYSTEM IN JAPAN

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lyons, Craig; Colton, David

2012-01-01

The U.S. Department of Energy National Nuclear Security Agency’s Aerial Measuring System deployed personnel and equipment to partner with the U.S. Air Force in Japan to conduct multiple aerial radiological surveys. These were the first and most comprehensive sources of actionable information for U.S. interests in Japan and provided early confirmation to the government of Japan as to the extent of the release from the Fukushima Daiichi Nuclear Power Generation Station. Many challenges were overcome quickly during the first 48 hours; including installation and operation of Aerial Measuring System equipment on multiple U.S. Air Force Japan aircraft, flying over difficultmore » terrain, and flying with talented pilots who were unfamiliar with the Aerial Measuring System flight patterns. These all combined to make for a dynamic and non-textbook situation. In addition, the data challenges of the multiple and on-going releases, and integration with the Japanese government to provide valid aerial radiological survey products that both military and civilian customers could use to make informed decisions, was extremely complicated. The Aerial Measuring System Fukushima response provided insight in addressing these challenges and gave way to an opportunity for the expansion of the Aerial Measuring System’s mission beyond the borders of the US.« less

Autonomous Aerial Refueling Ground Test Demonstration—A Sensor-in-the-Loop, Non-Tracking Method

PubMed Central

Chen, Chao-I; Koseluk, Robert; Buchanan, Chase; Duerner, Andrew; Jeppesen, Brian; Laux, Hunter

2015-01-01

An essential capability for an unmanned aerial vehicle (UAV) to extend its airborne duration without increasing the size of the aircraft is called the autonomous aerial refueling (AAR). This paper proposes a sensor-in-the-loop, non-tracking method for probe-and-drogue style autonomous aerial refueling tasks by combining sensitivity adjustments of a 3D Flash LIDAR camera with computer vision based image-processing techniques. The method overcomes the inherit ambiguity issues when reconstructing 3D information from traditional 2D images by taking advantage of ready to use 3D point cloud data from the camera, followed by well-established computer vision techniques. These techniques include curve fitting algorithms and outlier removal with the random sample consensus (RANSAC) algorithm to reliably estimate the drogue center in 3D space, as well as to establish the relative position between the probe and the drogue. To demonstrate the feasibility of the proposed method on a real system, a ground navigation robot was designed and fabricated. Results presented in the paper show that using images acquired from a 3D Flash LIDAR camera as real time visual feedback, the ground robot is able to track a moving simulated drogue and continuously narrow the gap between the robot and the target autonomously. PMID:25970254

Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Assoufid, L.; Rommeveaux, A.; Ohashi, H.

2005-01-01

This paper presents the first series of round-robin metrology measurements of x-ray mirrors organized at the Advanced Photon Source (APS) in the USA, the European Synchrotron Radiation Facility in France, and the Super Photon Ring (SPring-8) (in a collaboration with Osaka University, ) in Japan. This work is part of the three institutions' three-way agreement to promote a direct exchange of research information and experience amongst their specialists. The purpose of the metrology round robin is to compare the performance and limitations of the instrumentation used at the optical metrology laboratories of these facilities and to set the basis formore » establishing guidelines and procedures to accurately perform the measurements. The optics used in the measurements were selected to reflect typical, as well as state of the art, in mirror fabrication. The first series of the round robin measurements focuses on flat and cylindrical mirrors with varying sizes and quality. Three mirrors (two flats and one cylinder) were successively measured using long trace profilers. Although the three facilities' LTPs are of different design, the measurements were found to be in excellent agreement. The maximum discrepancy of the rms slope error values is 0.1 {micro}rad, that of the rms shape error was 3 nm, and they all relate to the measurement of the cylindrical mirror. The next round-robin measurements will deal with elliptical and spherical optics.« less

Line-width roughness of advanced semiconductor features by using FIB and planar-TEM as reference metrology

NASA Astrophysics Data System (ADS)

Takamasu, Kiyoshi; Takahashi, Satoru; Kawada, Hiroki; Ikota, Masami

2018-03-01

LER (Line Edge Roughness) and LWR (Line Width Roughness) of the semiconductor device are an important evaluation scale of the performance of the device. Conventionally, LER and LWR is evaluated from CD-SEM (Critical Dimension Scanning Electron Microscope) images. However, CD-SEM measurement has a problem that high frequency random noise is large, and resolution is not sufficiently high. For random noise of CD-SEM measurement, some techniques are proposed. In these methods, it is necessary to set parameters for model and processing, and it is necessary to verify the correctness of these parameters using reference metrology. We have already proposed a novel reference metrology using FIB (Focused Ion Beam) process and planar-TEM (Transmission Electron Microscope) method. In this study, we applied the proposed method to three new samples such as SAQP (Self-Aligned Quadruple Patterning) FinFET device, EUV (Extreme Ultraviolet Lithography) conventional resist, and EUV new material resist. LWR and PSD (Power Spectral Density) of LWR are calculated from the edge positions on planar-TEM images. We confirmed that LWR and PSD of LWR can be measured with high accuracy and evaluated the difference by the proposed method. Furthermore, from comparisons with PSD of the same sample by CD-SEM, the validity of measurement of PSD and LWR by CD-SEM can be verified.

The need for LWR metrology standardization: the imec roughness protocol

NASA Astrophysics Data System (ADS)

Lorusso, Gian Francesco; Sutani, Takumichi; Rutigliani, Vito; van Roey, Frieda; Moussa, Alain; Charley, Anne-Laure; Mack, Chris; Naulleau, Patrick; Constantoudis, Vassilios; Ikota, Masami; Ishimoto, Toru; Koshihara, Shunsuke

2018-03-01

As semiconductor technology keeps moving forward, undeterred by the many challenges ahead, one specific deliverable is capturing the attention of many experts in the field: Line Width Roughness (LWR) specifications are expected to be less than 2nm in the near term, and to drop below 1nm in just a few years. This is a daunting challenge and engineers throughout the industry are trying to meet these targets using every means at their disposal. However, although current efforts are surely admirable, we believe they are not enough. The fact is that a specification has a meaning only if there is an agreed methodology to verify if the criterion is met or not. Such a standardization is critical in any field of science and technology and the question that we need to ask ourselves today is whether we have a standardized LWR metrology or not. In other words, if a single reference sample were provided, would everyone measuring it get reasonably comparable results? We came to realize that this is not the case and that the observed spread in the results throughout the industry is quite large. In our opinion, this makes the comparison of LWR data among institutions, or to a specification, very difficult. In this paper, we report the spread of measured LWR data across the semiconductor industry. We investigate the impact of image acquisition, measurement algorithm, and frequency analysis parameters on LWR metrology. We review critically some of the International Technology Roadmap for Semiconductors (ITRS) metrology guidelines (such as measurement box length larger than 2μm and the need to correct for SEM noise). We compare the SEM roughness results to AFM measurements. Finally, we propose a standardized LWR measurement protocol - the imec Roughness Protocol (iRP) - intended to ensure that every time LWR measurements are compared (from various sources or to specifications), the comparison is sensible and sound. We deeply believe that the industry is at a point where it is

Investigation into the use of smartphone as a machine vision device for engineering metrology and flaw detection, with focus on drilling

NASA Astrophysics Data System (ADS)

Razdan, Vikram; Bateman, Richard

2015-05-01

This study investigates the use of a Smartphone and its camera vision capabilities in Engineering metrology and flaw detection, with a view to develop a low cost alternative to Machine vision systems which are out of range for small scale manufacturers. A Smartphone has to provide a similar level of accuracy as Machine Vision devices like Smart cameras. The objective set out was to develop an App on an Android Smartphone, incorporating advanced Computer vision algorithms written in java code. The App could then be used for recording measurements of Twist Drill bits and hole geometry, and analysing the results for accuracy. A detailed literature review was carried out for in-depth study of Machine vision systems and their capabilities, including a comparison between the HTC One X Android Smartphone and the Teledyne Dalsa BOA Smart camera. A review of the existing metrology Apps in the market was also undertaken. In addition, the drilling operation was evaluated to establish key measurement parameters of a twist Drill bit, especially flank wear and diameter. The methodology covers software development of the Android App, including the use of image processing algorithms like Gaussian Blur, Sobel and Canny available from OpenCV software library, as well as designing and developing the experimental set-up for carrying out the measurements. The results obtained from the experimental set-up were analysed for geometry of Twist Drill bits and holes, including diametrical measurements and flaw detection. The results show that Smartphones like the HTC One X have the processing power and the camera capability to carry out metrological tasks, although dimensional accuracy achievable from the Smartphone App is below the level provided by Machine vision devices like Smart cameras. A Smartphone with mechanical attachments, capable of image processing and having a reasonable level of accuracy in dimensional measurement, has the potential to become a handy low-cost Machine vision

Multi-temporal analysis of aerial images for the investigation of spatial-temporal dynamics of shallow erosion - a case study from the Tyrolean Alps

NASA Astrophysics Data System (ADS)

Wiegand, C.; Geitner, C.; Heinrich, K.; Rutzinger, M.

2012-04-01

Small and shallow eroded areas characterize the landscape of many pastures and meadows in the Alps. The extent of such erosion phenomena varies between 2 m2 and 200 m2. These patches tend to be only a few decimetres thick, with a maximum depth of 2 m. The processes involved are shallow landslides, superficial erosion by snow and livestock trampling. Key parameters that influence the emergence of shallow erosion are the geological, topographical and climatic circumstances in an area as well as its soils, vegetation and land use. The negative impact of this phenomenon includes not only the loss of soil but also the reduced attractiveness of the landscape, especially in tourist regions. One approach identifying and mapping geomorphological elements is remote sensing. The analysis of aerial images is a suitable method for identifying the multi-temporal dynamics of shallow eroded areas because of the good spatial and temporal resolution. For this purpose, we used a pixel-based approach to detect these areas semi-automatically in an orthophoto. In a first step, each aerial image was classified using dynamic thresholds derived from the histogram of the orthophoto. In a second step, the identified areas of erosion were filtered and visually in-terpreted. Based on this procedure, eroded areas with a minimum size of 5 m2 were detected in a test site located in the Inner Schmirn Valley (Tyrol, Austria). The altitude of the test site ranges between 1,980 m and 2,370 m, with a mean inclination of 36°, facing E to SE. Geologically, the slope is part of the "Hohe Tauern Window", characterized by "Bündner schists" deficient in lime and regolith. Until the 1960s, the slope was used as a hay meadow. Orthophotos from 2000, 2003, 2007 and 2010 were used for this investigation. Older aerial images were not suitable because of their lower resolution and poor ortho-rectification. However, they are useful for relating the results of the ten-year time-span to a larger temporal context

A metrological approach to improve accuracy and reliability of ammonia measurements in ambient air

NASA Astrophysics Data System (ADS)

Pogány, Andrea; Balslev-Harder, David; Braban, Christine F.; Cassidy, Nathan; Ebert, Volker; Ferracci, Valerio; Hieta, Tuomas; Leuenberger, Daiana; Martin, Nicholas A.; Pascale, Céline; Peltola, Jari; Persijn, Stefan; Tiebe, Carlo; Twigg, Marsailidh M.; Vaittinen, Olavi; van Wijk, Janneke; Wirtz, Klaus; Niederhauser, Bernhard

2016-11-01

The environmental impacts of ammonia (NH3) in ambient air have become more evident in the recent decades, leading to intensifying research in this field. A number of novel analytical techniques and monitoring instruments have been developed, and the quality and availability of reference gas mixtures used for the calibration of measuring instruments has also increased significantly. However, recent inter-comparison measurements show significant discrepancies, indicating that the majority of the newly developed devices and reference materials require further thorough validation. There is a clear need for more intensive metrological research focusing on quality assurance, intercomparability and validations. MetNH3 (Metrology for ammonia in ambient air) is a three-year project within the framework of the European Metrology Research Programme (EMRP), which aims to bring metrological traceability to ambient ammonia measurements in the 0.5-500 nmol mol-1 amount fraction range. This is addressed by working in three areas: (1) improving accuracy and stability of static and dynamic reference gas mixtures, (2) developing an optical transfer standard and (3) establishing the link between high-accuracy metrological standards and field measurements. In this article we describe the concept, aims and first results of the project.

Kite: Status of the External Metrology Testbed for SIM

NASA Technical Reports Server (NTRS)

Dekens, Frank G.; Alvarez-Salazar, Oscar; Azizi, Alireza; Moser, Steven; Nemati, Bijan; Negron, John; Neville, Timothy; Ryan, Daniel

2004-01-01

Kite is a system level testbed for the External Metrology system of the Space Interferometry Mission (SIM). The External Metrology System is used to track the fiducial that are located at the centers of the interferometer's siderostats. The relative changes in their positions needs to be tracked to tens of picometers in order to correct for thermal measurements, the Kite testbed was build to test both the metrology gauges and out ability to optically model the system at these levels. The Kite testbed is an over-constraint system where 6 lengths are measured, but only 5 are needed to determine the system. The agreement in the over-constrained length needs to be on the order of 140 pm for the SIM Wide-Angle observing scenario and 8 pm for the Narrow-Angle observing scenario. We demonstrate that we have met the Wide-Angle goal with our current setup. For the Narrow-Angle case, we have only reached the goal for on-axis observations. We describe the testbed improvements that have been made since our initial results, and outline the future Kite changes that will add further effects that SIM faces in order to make the testbed more SIM like.

Dynamic metrology and data processing for precision freeform optics fabrication and testing

NASA Astrophysics Data System (ADS)

Aftab, Maham; Trumper, Isaac; Huang, Lei; Choi, Heejoo; Zhao, Wenchuan; Graves, Logan; Oh, Chang Jin; Kim, Dae Wook

2017-06-01

Dynamic metrology holds the key to overcoming several challenging limitations of conventional optical metrology, especially with regards to precision freeform optical elements. We present two dynamic metrology systems: 1) adaptive interferometric null testing; and 2) instantaneous phase shifting deflectometry, along with an overview of a gradient data processing and surface reconstruction technique. The adaptive null testing method, utilizing a deformable mirror, adopts a stochastic parallel gradient descent search algorithm in order to dynamically create a null testing condition for unknown freeform optics. The single-shot deflectometry system implemented on an iPhone uses a multiplexed display pattern to enable dynamic measurements of time-varying optical components or optics in vibration. Experimental data, measurement accuracy / precision, and data processing algorithms are discussed.

Earthquakes and sea level - Space and terrestrial metrology on a changing planet

DOE Office of Scientific and Technical Information (OSTI.GOV)

Bilham, R.

1991-02-01

A review is presented of the stability and scale of crustal deformation metrology which has particular relevance to monitoring deformation associated with sea level and earthquakes. Developments in space geodesy and crustal deformation metrology in the last two decades have the potential to acquire a homogeneous global data set for monitoring relative horizontal and vertical motions of the earth's surface to within several millimeters. New tools discussed for forecasting sea level rise and damaging earthquakes include: very long baseline interferometry, satellite laser ranging, the principles of GPS geodesy, and new sea level sensors. Space geodesy permits a unified global basismore » for future metrology of the earth, and the continued availability of the GPS is currently fundamental to this unification.« less

Entropy-aware projected Landweber reconstruction for quantized block compressive sensing of aerial imagery

NASA Astrophysics Data System (ADS)

Liu, Hao; Li, Kangda; Wang, Bing; Tang, Hainie; Gong, Xiaohui

2017-01-01

A quantized block compressive sensing (QBCS) framework, which incorporates the universal measurement, quantization/inverse quantization, entropy coder/decoder, and iterative projected Landweber reconstruction, is summarized. Under the QBCS framework, this paper presents an improved reconstruction algorithm for aerial imagery, QBCS, with entropy-aware projected Landweber (QBCS-EPL), which leverages the full-image sparse transform without Wiener filter and an entropy-aware thresholding model for wavelet-domain image denoising. Through analyzing the functional relation between the soft-thresholding factors and entropy-based bitrates for different quantization methods, the proposed model can effectively remove wavelet-domain noise of bivariate shrinkage and achieve better image reconstruction quality. For the overall performance of QBCS reconstruction, experimental results demonstrate that the proposed QBCS-EPL algorithm significantly outperforms several existing algorithms. With the experiment-driven methodology, the QBCS-EPL algorithm can obtain better reconstruction quality at a relatively moderate computational cost, which makes it more desirable for aerial imagery applications.

Improving Measurement of Forest Structural Parameters by Co-Registering of High Resolution Aerial Imagery and Low Density LiDAR Data

PubMed Central

Huang, Huabing; Gong, Peng; Cheng, Xiao; Clinton, Nick; Li, Zengyuan

2009-01-01

Forest structural parameters, such as tree height and crown width, are indispensable for evaluating forest biomass or forest volume. LiDAR is a revolutionary technology for measurement of forest structural parameters, however, the accuracy of crown width extraction is not satisfactory when using a low density LiDAR, especially in high canopy cover forest. We used high resolution aerial imagery with a low density LiDAR system to overcome this shortcoming. A morphological filtering was used to generate a DEM (Digital Elevation Model) and a CHM (Canopy Height Model) from LiDAR data. The LiDAR camera image is matched to the aerial image with an automated keypoints search algorithm. As a result, a high registration accuracy of 0.5 pixels was obtained. A local maximum filter, watershed segmentation, and object-oriented image segmentation are used to obtain tree height and crown width. Results indicate that the camera data collected by the integrated LiDAR system plays an important role in registration with aerial imagery. The synthesis with aerial imagery increases the accuracy of forest structural parameter extraction when compared to only using the low density LiDAR data. PMID:22573971

Random Access Memories: A New Paradigm for Target Detection in High Resolution Aerial Remote Sensing Images.

PubMed

Zou, Zhengxia; Shi, Zhenwei

2018-03-01

We propose a new paradigm for target detection in high resolution aerial remote sensing images under small target priors. Previous remote sensing target detection methods frame the detection as learning of detection model + inference of class-label and bounding-box coordinates. Instead, we formulate it from a Bayesian view that at inference stage, the detection model is adaptively updated to maximize its posterior that is determined by both training and observation. We call this paradigm "random access memories (RAM)." In this paradigm, "Memories" can be interpreted as any model distribution learned from training data and "random access" means accessing memories and randomly adjusting the model at detection phase to obtain better adaptivity to any unseen distribution of test data. By leveraging some latest detection techniques e.g., deep Convolutional Neural Networks and multi-scale anchors, experimental results on a public remote sensing target detection data set show our method outperforms several other state of the art methods. We also introduce a new data set "LEarning, VIsion and Remote sensing laboratory (LEVIR)", which is one order of magnitude larger than other data sets of this field. LEVIR consists of a large set of Google Earth images, with over 22 k images and 10 k independently labeled targets. RAM gives noticeable upgrade of accuracy (an mean average precision improvement of 1% ~ 4%) of our baseline detectors with acceptable computational overhead.

Detecting blind building façades from highly overlapping wide angle aerial imagery

NASA Astrophysics Data System (ADS)

Burochin, Jean-Pascal; Vallet, Bruno; Brédif, Mathieu; Mallet, Clément; Brosset, Thomas; Paparoditis, Nicolas

2014-10-01

This paper deals with the identification of blind building façades, i.e. façades which have no openings, in wide angle aerial images with a decimeter pixel size, acquired by nadir looking cameras. This blindness characterization is in general crucial for real estate estimation and has, at least in France, a particular importance on the evaluation of legal permission of constructing on a parcel due to local urban planning schemes. We assume that we have at our disposal an aerial survey with a relatively high stereo overlap along-track and across-track and a 3D city model of LoD 1, that can have been generated with the input images. The 3D model is textured with the aerial imagery by taking into account the 3D occlusions and by selecting for each façade the best available resolution texture seeing the whole façade. We then parse all 3D façades textures by looking for evidence of openings (windows or doors). This evidence is characterized by a comprehensive set of basic radiometric and geometrical features. The blindness prognostic is then elaborated through an (SVM) supervised classification. Despite the relatively low resolution of the images, we reach a classification accuracy of around 85% on decimeter resolution imagery with 60 × 40 % stereo overlap. On the one hand, we show that the results are very sensitive to the texturing resampling process and to vegetation presence on façade textures. On the other hand, the most relevant features for our classification framework are related to texture uniformity and horizontal aspect and to the maximal contrast of the opening detections. We conclude that standard aerial imagery used to build 3D city models can also be exploited to some extent and at no additional cost for facade blindness characterisation.

Gloss evaluation from soft and hard metrologies.

PubMed

Wang, Zihao; Xu, Lihao; Hu, Yu; Mirjalili, Fereshteh; Luo, Ming Ronnier

2017-09-01

Recent advances in bidirectional reflectance distribution function (BRDF) acquisitions have provided a novel approach for appearance measurement and analysis. In particular, since gloss appearance is dependent on the directional reflective properties of surfaces, it is reasonable to leverage the BRDF for gloss evaluation. In this paper, we investigate gloss appearance from both soft metrology and hard metrology. A psychophysical experiment was conducted for the gloss assessment of 47 neutral-color samples. In the evaluation of gloss perception from gloss meter measurements, we report several ambiguous correspondences in the medium gloss range. In order to analyze and explain this phenomenon, the BRDF was acquired and examined using a commercial BRDF measuring device. With an improved correlation-to-visual perception, we propose a two-dimensional gloss model by combining a parameter, the standard deviation of the specular lobe, from Ward's BRDF model with measured gloss values.

Metrological reliability of optical coherence tomography in biomedical applications

NASA Astrophysics Data System (ADS)

Goloni, C. M.; Temporão, G. P.; Monteiro, E. C.

2013-09-01

Optical coherence tomography (OCT) has been proving to be an efficient diagnostics technique for imaging in vivo tissues, an optical biopsy with important perspectives as a diagnostic tool for quantitative characterization of tissue structures. Despite its established clinical use, there is no international standard to address the specific requirements for basic safety and essential performance of OCT devices for biomedical imaging. The present work studies the parameters necessary for conformity assessment of optoelectronics equipment used in biomedical applications like Laser, Intense Pulsed Light (IPL), and OCT, targeting to identify the potential requirements to be considered in the case of a future development of a particular standard for OCT equipment. In addition to some of the particular requirements standards for laser and IPL, also applicable for metrological reliability analysis of OCT equipment, specific parameters for OCT's evaluation have been identified, considering its biomedical application. For each parameter identified, its information on the accompanying documents and/or its measurement has been recommended. Among the parameters for which the measurement requirement was recommended, including the uncertainty evaluation, the following are highlighted: optical radiation output, axial and transverse resolution, pulse duration and interval, and beam divergence.

Remote laboratories for optical metrology: from the lab to the cloud

NASA Astrophysics Data System (ADS)

Osten, W.; Wilke, M.; Pedrini, G.

2012-10-01

The idea of remote and virtual metrology has been reported already in 2000 with a conceptual illustration by use of comparative digital holography, aimed at the comparison of two nominally identical but physically different objects, e.g., master and sample, in industrial inspection processes. However, the concept of remote and virtual metrology can be extended far beyond this. For example, it does not only allow for the transmission of static holograms over the Internet, but also provides an opportunity to communicate with and eventually control the physical set-up of a remote metrology system. Furthermore, the metrology system can be modeled in the environment of a 3D virtual reality using CAD or similar technology, providing a more intuitive interface to the physical setup within the virtual world. An engineer or scientist who would like to access the remote real world system can log on to the virtual system, moving and manipulating the setup through an avatar and take the desired measurements. The real metrology system responds to the interaction between the avatar and the 3D virtual representation, providing a more intuitive interface to the physical setup within the virtual world. The measurement data are stored and interpreted automatically for appropriate display within the virtual world, providing the necessary feedback to the experimenter. Such a system opens up many novel opportunities in industrial inspection such as the remote master-sample-comparison and the virtual assembling of parts that are fabricated at different places. Moreover, a multitude of new techniques can be envisaged. To them belong modern ways for documenting, efficient methods for metadata storage, the possibility for remote reviewing of experimental results, the adding of real experiments to publications by providing remote access to the metadata and to the experimental setup via Internet, the presentation of complex experiments in classrooms and lecture halls, the sharing of

The Opportunities and Challenges of Bringing New Metrology Equipment to Market

NASA Astrophysics Data System (ADS)

Perloff, David S.

2005-09-01

This paper provides an overview of the economic and technological factors which are driving the demand for new metrology and inspection equipment, the challenges and opportunities facing new companies in bringing such equipment to market, and the funding environment in which new companies must raise capital to finance their efforts. Seven metrology companies and one inspection equipment company that have received first-time venture backing since 2000 are used to illustrate how these specialized businesses are launched and funded.

Reference metrology in a research fab: the NIST clean calibrations thrust

NASA Astrophysics Data System (ADS)

Dixson, Ronald; Fu, Joe; Orji, Ndubuisi; Renegar, Thomas; Zheng, Alan; Vorburger, Theodore; Hilton, Al; Cangemi, Marc; Chen, Lei; Hernandez, Mike; Hajdaj, Russell; Bishop, Michael; Cordes, Aaron

2009-03-01

In 2004, the National Institute of Standards and Technology (NIST) commissioned the Advanced Measurement Laboratory (AML) - a state-of-the-art, five-wing laboratory complex for leading edge NIST research. The NIST NanoFab - a 1765 m2 (19,000 ft2) clean room with 743 m2 (8000 ft2) of class 100 space - is the anchor of this facility and an integral component of the new Center for Nanoscale Science and Technology (CNST) at NIST. Although the CNST/NanoFab is a nanotechnology research facility with a different strategic focus than a current high volume semiconductor fab, metrology tools still play an important role in the nanofabrication research conducted here. Some of the metrology tools available to users of the NanoFab include stylus profiling, scanning electron microscopy (SEM), and atomic force microscopy (AFM). Since 2001, NIST has collaborated with SEMATECH to implement a reference measurement system (RMS) using critical dimension atomic force microscopy (CD-AFM). NIST brought metrology expertise to the table and SEMATECH provided access to leading edge metrology tools in their clean room facility in Austin. Now, in the newly launched "clean calibrations" thrust at NIST, we are implementing the reference metrology paradigm on several tools in the CNST/NanoFab. Initially, we have focused on calibration, monitoring, and uncertainty analysis for a three-tool set consisting of a stylus profiler, an SEM, and an AFM. Our larger goal is the development of new and supplemental calibrations and standards that will benefit from the Class 100 environment available in the NanoFab and offering our customers calibration options that do not require exposing their samples to less clean environments. Toward this end, we have completed a preliminary evaluation of the performance of these instruments. The results of these evaluations suggest that the achievable uncertainties are generally consistent with our measurement goals.

DABAM: an open-source database of X-ray mirrors metrology

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sanchez del Rio, Manuel; Bianchi, Davide; Cocco, Daniele

2016-04-20

An open-source database containing metrology data for X-ray mirrors is presented. It makes available metrology data (mirror heights and slopes profiles) that can be used with simulation tools for calculating the effects of optical surface errors in the performances of an optical instrument, such as a synchrotron beamline. A typical case is the degradation of the intensity profile at the focal position in a beamline due to mirror surface errors. This database for metrology (DABAM) aims to provide to the users of simulation tools the data of real mirrors. The data included in the database are described in this paper,more » with details of how the mirror parameters are stored. An accompanying software is provided to allow simple access and processing of these data, calculate the most usual statistical parameters, and also include the option of creating input files for most used simulation codes. Some optics simulations are presented and discussed to illustrate the real use of the profiles from the database.« less

DABAM: an open-source database of X-ray mirrors metrology

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sanchez del Rio, Manuel; Bianchi, Davide; Cocco, Daniele

An open-source database containing metrology data for X-ray mirrors is presented. It makes available metrology data (mirror heights and slopes profiles) that can be used with simulation tools for calculating the effects of optical surface errors in the performances of an optical instrument, such as a synchrotron beamline. A typical case is the degradation of the intensity profile at the focal position in a beamline due to mirror surface errors. This database for metrology (DABAM) aims to provide to the users of simulation tools the data of real mirrors. The data included in the database are described in this paper,more » with details of how the mirror parameters are stored. An accompanying software is provided to allow simple access and processing of these data, calculate the most usual statistical parameters, and also include the option of creating input files for most used simulation codes. Some optics simulations are presented and discussed to illustrate the real use of the profiles from the database.« less

DABAM: An open-source database of X-ray mirrors metrology

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sanchez del Rio, Manuel; Bianchi, Davide; Cocco, Daniele

An open-source database containing metrology data for X-ray mirrors is presented. It makes available metrology data (mirror heights and slopes profiles) that can be used with simulation tools for calculating the effects of optical surface errors in the performances of an optical instrument, such as a synchrotron beamline. A typical case is the degradation of the intensity profile at the focal position in a beamline due to mirror surface errors. This database for metrology (DABAM) aims to provide to the users of simulation tools the data of real mirrors. The data included in the database are described in this paper,more » with details of how the mirror parameters are stored. An accompanying software is provided to allow simple access and processing of these data, calculate the most usual statistical parameters, and also include the option of creating input files for most used simulation codes. In conclusion, some optics simulations are presented and discussed to illustrate the real use of the profiles from the database.« less

DABAM: An open-source database of X-ray mirrors metrology

DOE PAGES

Sanchez del Rio, Manuel; Bianchi, Davide; Cocco, Daniele; ...

2016-05-01

An open-source database containing metrology data for X-ray mirrors is presented. It makes available metrology data (mirror heights and slopes profiles) that can be used with simulation tools for calculating the effects of optical surface errors in the performances of an optical instrument, such as a synchrotron beamline. A typical case is the degradation of the intensity profile at the focal position in a beamline due to mirror surface errors. This database for metrology (DABAM) aims to provide to the users of simulation tools the data of real mirrors. The data included in the database are described in this paper,more » with details of how the mirror parameters are stored. An accompanying software is provided to allow simple access and processing of these data, calculate the most usual statistical parameters, and also include the option of creating input files for most used simulation codes. In conclusion, some optics simulations are presented and discussed to illustrate the real use of the profiles from the database.« less

a Method for Simultaneous Aerial and Terrestrial Geodata Acquisition for Corridor Mapping

NASA Astrophysics Data System (ADS)

Molina, P.; Blázquez, M.; Sastre, J.; Colomina, I.

2015-08-01

In this paper, we present mapKITE, a new mobile, simultaneous terrestrial and aerial, geodata collection and post-processing method. On one side, the method combines a terrestrial mobile mapping system (TMMS) with an unmanned aerial mapping one, both equipped with remote sensing payloads (at least, a nadir-looking visible-band camera in the UA) by means of which aerial and terrestrial geodata are acquired simultaneously. This tandem geodata acquisition system is based on a terrestrial vehicle (TV) and on an unmanned aircraft (UA) linked by a 'virtual tether', that is, a mechanism based on the real-time supply of UA waypoints by the TV. By means of the TV-to-UA tether, the UA follows the TV keeping a specific relative TV-to-UA spatial configuration enabling the simultaneous operation of both systems to obtain highly redundant and complementary geodata. On the other side, mapKITE presents a novel concept for geodata post-processing favoured by the rich geometrical aspects derived from the mapKITE tandem simultaneous operation. The approach followed for sensor orientation and calibration of the aerial images captured by the UA inherits the principles of Integrated Sensor Orientation (ISO) and adds the pointing-and-scaling photogrammetric measurement of a distinctive element observed in every UA image, which is a coded target mounted on the roof of the TV. By means of the TV navigation system, the orientation of the TV coded target is performed and used in the post-processing UA image orientation approach as a Kinematic Ground Control Point (KGCP). The geometric strength of a mapKITE ISO network is therefore high as it counts with the traditional tie point image measurements, static ground control points, kinematic aerial control and the new point-and-scale measurements of the KGCPs. With such a geometry, reliable system and sensor orientation and calibration and eventual further reduction of the number of traditional ground control points is feasible. The different

27. AERIAL VIEW OF ARVFS FIELD TEST SITE AS IT ...

Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

27. AERIAL VIEW OF ARVFS FIELD TEST SITE AS IT LOOKED IN 1983. OBLIQUE VIEW FACING EAST. BUNKER IS IN FOREGROUND, PROTECTIVE SHED FOR WFRP AT TOP OF IMAGE. INEL PHOTO NUMBER 83-574-12-1, TAKEN IN 1983. PHOTOGRAPHER: ROMERO. - Idaho National Engineering Laboratory, Advanced Reentry Vehicle Fusing System, Scoville, Butte County, ID

7 CFR 1755.506 - Aerial wire services

Code of Federal Regulations, 2011 CFR

2011-01-01

... 7 Agriculture 11 2011-01-01 2011-01-01 false Aerial wire services 1755.506 Section 1755.506... § 1755.506 Aerial wire services (a) Aerial services of one through six pairs shall consist of Service...), Specifications and Drawings for Service Installations at Customer Access Locations. The wire used for aerial...

Quantum-enhanced metrology for multiple phase estimation with noise

PubMed Central

Yue, Jie-Dong; Zhang, Yu-Ran; Fan, Heng

2014-01-01

We present a general quantum metrology framework to study the simultaneous estimation of multiple phases in the presence of noise as a discretized model for phase imaging. This approach can lead to nontrivial bounds of the precision for multiphase estimation. Our results show that simultaneous estimation (SE) of multiple phases is always better than individual estimation (IE) of each phase even in noisy environment. The utility of the bounds of multiple phase estimation for photon loss channels is exemplified explicitly. When noise is low, those bounds possess the Heisenberg scale showing quantum-enhanced precision with the O(d) advantage for SE, where d is the number of phases. However, this O(d) advantage of SE scheme in the variance of the estimation may disappear asymptotically when photon loss becomes significant and then only a constant advantage over that of IE scheme demonstrates. Potential application of those results is presented. PMID:25090445

Present status of metrology of electro-optical surveillance systems

NASA Astrophysics Data System (ADS)

Chrzanowski, K.

2017-10-01

There has been a significant progress in equipment for testing electro-optical surveillance systems over the last decade. Modern test systems are increasingly computerized, employ advanced image processing and offer software support in measurement process. However, one great challenge, in form of relative low accuracy, still remains not solved. It is quite common that different test stations, when testing the same device, produce different results. It can even happen that two testing teams, while working on the same test station, with the same tested device, produce different results. Rapid growth of electro-optical technology, poor standardization, limited metrology infrastructure, subjective nature of some measurements, fundamental limitations from laws of physics, tendering rules and advances in artificial intelligence are major factors responsible for such situation. Regardless, next decade should bring significant improvements, since improvement in measurement accuracy is needed to sustain fast growth of electro-optical surveillance technology.

Quantum metrology and estimation of Unruh effect

PubMed Central

Wang, Jieci; Tian, Zehua; Jing, Jiliang; Fan, Heng

2014-01-01

We study the quantum metrology for a pair of entangled Unruh-Dewitt detectors when one of them is accelerated and coupled to a massless scalar field. Comparing with previous schemes, our model requires only local interaction and avoids the use of cavities in the probe state preparation process. We show that the probe state preparation and the interaction between the accelerated detector and the external field have significant effects on the value of quantum Fisher information, correspondingly pose variable ultimate limit of precision in the estimation of Unruh effect. We find that the precision of the estimation can be improved by a larger effective coupling strength and a longer interaction time. Alternatively, the energy gap of the detector has a range that can provide us a better precision. Thus we may adjust those parameters and attain a higher precision in the estimation. We also find that an extremely high acceleration is not required in the quantum metrology process. PMID:25424772

Evaluating diffraction based overlay metrology for double patterning technologies

NASA Astrophysics Data System (ADS)

Saravanan, Chandra Saru; Liu, Yongdong; Dasari, Prasad; Kritsun, Oleg; Volkman, Catherine; Acheta, Alden; La Fontaine, Bruno

2008-03-01

Demanding sub-45 nm node lithographic methodologies such as double patterning (DPT) pose significant challenges for overlay metrology. In this paper, we investigate scatterometry methods as an alternative approach to meet these stringent new metrology requirements. We used a spectroscopic diffraction-based overlay (DBO) measurement technique in which registration errors are extracted from specially designed diffraction targets for double patterning. The results of overlay measurements are compared to traditional bar-in-bar targets. A comparison between DBO measurements and CD-SEM measurements is done to show the correlation between the two approaches. We discuss the total measurement uncertainty (TMU) requirements for sub-45 nm nodes and compare TMU from the different overlay approaches.

Investigating an Aerial Image First

ERIC Educational Resources Information Center

Wyrembeck, Edward P.; Elmer, Jeffrey S.

2006-01-01

Most introductory optics lab activities begin with students locating the real image formed by a converging lens. The method is simple and straightforward--students move a screen back and forth until the real image is in sharp focus on the screen. Students then draw a simple ray diagram to explain the observation using only two or three special…

Nonlinear gamma correction via normed bicoherence minimization in optical fringe projection metrology

NASA Astrophysics Data System (ADS)

Kamagara, Abel; Wang, Xiangzhao; Li, Sikun

2018-03-01

We propose a method to compensate for the projector intensity nonlinearity induced by gamma effect in three-dimensional (3-D) fringe projection metrology by extending high-order spectra analysis and bispectral norm minimization to digital sinusoidal fringe pattern analysis. The bispectrum estimate allows extraction of vital signal information features such as spectral component correlation relationships in fringe pattern images. Our approach exploits the fact that gamma introduces high-order harmonic correlations in the affected fringe pattern image. Estimation and compensation of projector nonlinearity is realized by detecting and minimizing the normed bispectral coherence of these correlations. The proposed technique does not require calibration information and technical knowledge or specification of fringe projection unit. This is promising for developing a modular and calibration-invariant model for intensity nonlinear gamma compensation in digital fringe pattern projection profilometry. Experimental and numerical simulation results demonstrate this method to be efficient and effective in improving the phase measuring accuracies with phase-shifting fringe pattern projection profilometry.

EUV wavefront metrology system in EUVA

NASA Astrophysics Data System (ADS)

Hasegawa, Takayuki; Ouchi, Chidane; Hasegawa, Masanobu; Kato, Seima; Suzuki, Akiyoshi; Sugisaki, Katsumi; Murakami, Katsuhiko; Saito, Jun; Niibe, Masahito

2004-05-01

An Experimental extreme ultraviolet (EUV) interferometer (EEI) using an undulator as a light source was installed in New SUBARU synchrotron facility at Himeji Institute of Technology (HIT). The EEI can evaluate the five metrology methods reported before. (1) A purpose of the EEI is to determine the most suitable method for measuring the projection optics of EUV lithography systems for mass production tools.

Development of metrology for freeform optics in reflection mode

NASA Astrophysics Data System (ADS)

Burada, Dali R.; Pant, Kamal K.; Mishra, Vinod; Bichra, Mohamed; Khan, Gufran S.; Sinzinger, Stefan; Shakher, Chandra

2017-06-01

The increased range of manufacturable freeform surfaces offered by the new fabrication techniques is giving opportunities to incorporate them in the optical systems. However, the success of these fabrication techniques depends on the capabilities of metrology procedures and a feedback mechanism to CNC machines for optimizing the manufacturing process. Therefore, a precise and in-situ metrology technique for freeform optics is in demand. Though all the techniques available for aspheres have been extended for the freeform surfaces by the researchers, but none of the techniques has yet been incorporated into the manufacturing machine for in-situ measurement. The most obvious reason is the complexity involved in the optical setups to be integrated in the manufacturing platforms. The Shack-Hartmann sensor offers the potential to be incorporated into the machine environment due to its vibration insensitivity, compactness and 3D shape measurement capability from slope data. In the present work, a measurement scheme is reported in which a scanning Shack-Hartmann Sensor has been employed and used as a metrology tool for measurement of freeform surface in reflection mode. Simulation studies are conducted for analyzing the stitching accuracy in presence of various misalignment errors. The proposed scheme is experimentally verified on a freeform surface of cubic phase profile.

Advanced optical imaging platform for CD metrology and defect review on 130-nm to 100-nm node reticles: an overview of preliminary results

NASA Astrophysics Data System (ADS)

Hourd, Andrew C.; Grimshaw, Anthony; Scheuring, Gerd; Gittinger, Christian; Brueck, Hans-Juergen; Chen, Shiuh-Bin; Chen, Parkson W.; Hartmann, Hans; Ordynskyy, Volodymyr; Jonckheere, Rik M.; Philipsen, Vicky; Schaetz, Thomas; Sommer, Karl

2002-08-01

Critical Dimension fidelity continues to be one of the key driving parameters defining photomask quality and printing performance. The present advanced optical CD metrology systems, operating at i-line, will very soon be challenged as viable tools owing to their restricted resolution and measurement linearity impact on the ability to produce repeatable measurements. Alternative measurement technologies such as CD-SEM and -AFM have started to appear, but are also not without tier concerns in the field of reticle CD metrology. This paper introduces a new optical metrology system (MueTec /) operating at DUV wavelength (248nm), which has been specifically designed to meet the resolution and measurement repeatability requirements of reticle manufacture at the 130nm and 100nm nodes. The system is based upon a specially designed mechanical-optical platform for maximum stability and very advanced optical, illumination, alignment and software systems. The at wavelength operation of this system also makes it an ideal platform for defect printability analysis and review. The system is currently part of a European Commission funded assessment project (IST-2000-28086: McD'OR) to develop a testing strategy to verify the system performance, agree on equipment specifications and demonstrate its capability on advanced production reticles - including long-term reliability. It is the preliminary results from this evaluation that are presented here.

On-orbit Metrology and Calibration Requirements for Space Station Activities Definition Study

NASA Technical Reports Server (NTRS)

Cotty, G. M.; Ranganathan, B. N.; Sorrell, A. L.

1989-01-01

The Space Station is the focal point for the commercial development of space. The long term routine operation of the Space Station and the conduct of future commercial activities suggests the need for in-space metrology capabilities analogous when possible to those on-Earth. The ability to perform periodic calibrations and measurements with proper traceability is imperative for the routine operation of the Space Station. An initial review, however, indicated a paucity of data related to metrology and calibration requirements for in-space operations. This condition probably exists because of the highly developmental aspect of space activities to date, their short duration, and nonroutine nature. The on-orbit metrology and calibration needs of the Space Station were examined and assessed. In order to achieve this goal, the following tasks were performed: an up-to-date literature review; identification of on-orbit calibration techniques; identification of sensor calibration requirements; identification of calibration equipment requirements; definition of traceability requirements; preparation of technology development plans; and preparation of the final report. Significant information and major highlights pertaining to each task is presented. In addition, some general (generic) conclusions/observations and recommendations that are pertinent to the overall in-space metrology and calibration activities are presented.

Carbon contamination analysis and its effect on extreme ultra violet mask imaging performance using coherent scattering microscopy/in-situ accelerated contamination system.

PubMed

Jeong, Chang Young; Lee, Sangsul; Doh, Jong Gul; Lee, Jae Uk; Cha, Han-sun; Nichols, William T; Lee, Dong Gun; Kim, Seong Sue; Cho, Han Ku; Rah, Seung-yu; Ahn, Jinho

2011-07-01

The coherent scattering microscopy/in-situ accelerated contamination system (CSM/ICS) is a developmental metrology tool designed to analyze the impact of carbon contamination on the imaging performance. It was installed at 11B EUVL beam-line of the Pohang Accelerator Laboratory (PAL). Monochromatized 13.5 nm wavelength beam with Mo/Si multilayer mirrors and zirconium filters was used. The CSM/ICS is composed of the CSM for measuring imaging properties and the ICS for implementing acceleration of carbon contamination. The CSM has been proposed as an actinic inspection technique that records the coherent diffraction pattern from the EUV mask and reconstructs its aerial image using a phase retrieval algorithm. To improve the CSM measurement accuracy, optical and electrical noises of main chamber were minimized. The background noise level measured by CCD camera was approximately 8.5 counts (3 sigma) when the EUV beam was off. Actinic CD measurement repeatability was <1 A (3 sigma) at 17.5 nm line and space pattern. The influence of carbon contamination on the imaging properties can be analyzed by transferring EUV mask to CSM imaging center position after executing carbon contamination without a fine alignment system. We also installed photodiode and ellipsometry for in-situ reflectivity and thickness measurement. This paper describes optical design and system performance observed during the first phase of integration, including CSM imaging performance and carbon contamination analysis results.

Correction of Line Interleaving Displacement in Frame Captured Aerial Video Imagery

Treesearch

B. Cooke; A. Saucier

1995-01-01

Scientists with the USDA Forest Service are currently assessing the usefulness of aerial video imagery for various purposes including midcycle inventory updates. The potential of video image data for these purposes may be compromised by scan line interleaving displacement problems. Interleaving displacement problems cause features in video raster datasets to have...

Target-Tracking Camera for a Metrology System

NASA Technical Reports Server (NTRS)

Liebe, Carl; Bartman, Randall; Chapsky, Jacob; Abramovici, Alexander; Brown, David

2009-01-01

An analog electronic camera that is part of a metrology system measures the varying direction to a light-emitting diode that serves as a bright point target. In the original application for which the camera was developed, the metrological system is used to determine the varying relative positions of radiating elements of an airborne synthetic aperture-radar (SAR) antenna as the airplane flexes during flight; precise knowledge of the relative positions as a function of time is needed for processing SAR readings. It has been common metrology system practice to measure the varying direction to a bright target by use of an electronic camera of the charge-coupled-device or active-pixel-sensor type. A major disadvantage of this practice arises from the necessity of reading out and digitizing the outputs from a large number of pixels and processing the resulting digital values in a computer to determine the centroid of a target: Because of the time taken by the readout, digitization, and computation, the update rate is limited to tens of hertz. In contrast, the analog nature of the present camera makes it possible to achieve an update rate of hundreds of hertz, and no computer is needed to determine the centroid. The camera is based on a position-sensitive detector (PSD), which is a rectangular photodiode with output contacts at opposite ends. PSDs are usually used in triangulation for measuring small distances. PSDs are manufactured in both one- and two-dimensional versions. Because it is very difficult to calibrate two-dimensional PSDs accurately, the focal-plane sensors used in this camera are two orthogonally mounted one-dimensional PSDs.

Open Skies aerial photography of selected areas in Central America affected by Hurricane Mitch

USGS Publications Warehouse

Molnia, Bruce; Hallam, Cheryl A.

1999-01-01

Between October 27 and November 1, 1998, Central America was devastated by Hurricane Mitch. Following a humanitarian relief effort, one of the first informational needs was complete aerial photographic coverage of the storm ravaged areas so that the governments of the affected countries, the U.S. agencies planning to provide assistance, and the international relief community could come to the aid of the residents of the devastated area. Between December 4 and 19, 1998 an Open Skies aircraft conducted five successful missions and obtained more than 5,000 high-resolution aerial photographs and more than 15,000 video images. The aerial data are being used by the Reconstruction Task Force and many others who are working to begin rebuilding and to help reduce the risk of future destruction.

The Need of Nested Grids for Aerial and Satellite Images and Digital Elevation Models

NASA Astrophysics Data System (ADS)

Villa, G.; Mas, S.; Fernández-Villarino, X.; Martínez-Luceño, J.; Ojeda, J. C.; Pérez-Martín, B.; Tejeiro, J. A.; García-González, C.; López-Romero, E.; Soteres, C.

2016-06-01

Usual workflows for production, archiving, dissemination and use of Earth observation images (both aerial and from remote sensing satellites) pose big interoperability problems, as for example: non-alignment of pixels at the different levels of the pyramids that makes it impossible to overlay, compare and mosaic different orthoimages, without resampling them and the need to apply multiple resamplings and compression-decompression cycles. These problems cause great inefficiencies in production, dissemination through web services and processing in "Big Data" environments. Most of them can be avoided, or at least greatly reduced, with the use of a common "nested grid" for mutiresolution production, archiving, dissemination and exploitation of orthoimagery, digital elevation models and other raster data. "Nested grids" are space allocation schemas that organize image footprints, pixel sizes and pixel positions at all pyramid levels, in order to achieve coherent and consistent multiresolution coverage of a whole working area. A "nested grid" must be complemented by an appropriate "tiling schema", ideally based on the "quad-tree" concept. In the last years a "de facto standard" grid and Tiling Schema has emerged and has been adopted by virtually all major geospatial data providers. It has also been adopted by OGC in its "WMTS Simple Profile" standard. In this paper we explain how the adequate use of this tiling schema as common nested grid for orthoimagery, DEMs and other types of raster data constitutes the most practical solution to most of the interoperability problems of these types of data.

Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach

DOE Office of Scientific and Technical Information (OSTI.GOV)

Su P.; Kaznatcheev K.; Wang, Y.

In a previous paper, the University of Arizona (UA) has developed a measurement technique called: Software Configurable Optical Test System (SCOTS) based on the principle of reflection deflectometry. In this paper, we present results of this very efficient optical metrology method applied to the metrology of X-ray mirrors. We used this technique to measure surface slope errors with precision and accuracy better than 100 nrad (rms) and {approx}200 nrad (rms), respectively, with a lateral resolution of few mm or less. We present results of the calibration of the metrology systems, discuss their accuracy and address the precision in measuring amore » spherical mirror.« less

Metrology for industrial quantum communications: the MIQC project

NASA Astrophysics Data System (ADS)

Rastello, M. L.; Degiovanni, I. P.; Sinclair, A. G.; Kück, S.; Chunnilall, C. J.; Porrovecchio, G.; Smid, M.; Manoocheri, F.; Ikonen, E.; Kubarsepp, T.; Stucki, D.; Hong, K. S.; Kim, S. K.; Tosi, A.; Brida, G.; Meda, A.; Piacentini, F.; Traina, P.; Natsheh, A. Al; Cheung, J. Y.; Müller, I.; Klein, R.; Vaigu, A.

2014-12-01

The ‘Metrology for Industrial Quantum Communication Technologies’ project (MIQC) is a metrology framework that fosters development and market take-up of quantum communication technologies and is aimed at achieving maximum impact for the European industry in this area. MIQC is focused on quantum key distribution (QKD) technologies, the most advanced quantum-based technology towards practical application. QKD is a way of sending cryptographic keys with absolute security. It does this by exploiting the ability to encode in a photon's degree of freedom specific quantum states that are noticeably disturbed if an eavesdropper trying to decode it is present in the communication channel. The MIQC project has started the development of independent measurement standards and definitions for the optical components of QKD system, since one of the perceived barriers to QKD market success is the lack of standardization and quality assurance.

New method of 2-dimensional metrology using mask contouring

NASA Astrophysics Data System (ADS)

Matsuoka, Ryoichi; Yamagata, Yoshikazu; Sugiyama, Akiyuki; Toyoda, Yasutaka

2008-10-01

We have developed a new method of accurately profiling and measuring of a mask shape by utilizing a Mask CD-SEM. The method is intended to realize high accuracy, stability and reproducibility of the Mask CD-SEM adopting an edge detection algorithm as the key technology used in CD-SEM for high accuracy CD measurement. In comparison with a conventional image processing method for contour profiling, this edge detection method is possible to create the profiles with much higher accuracy which is comparable with CD-SEM for semiconductor device CD measurement. This method realizes two-dimensional metrology for refined pattern that had been difficult to measure conventionally by utilizing high precision contour profile. In this report, we will introduce the algorithm in general, the experimental results and the application in practice. As shrinkage of design rule for semiconductor device has further advanced, an aggressive OPC (Optical Proximity Correction) is indispensable in RET (Resolution Enhancement Technology). From the view point of DFM (Design for Manufacturability), a dramatic increase of data processing cost for advanced MDP (Mask Data Preparation) for instance and surge of mask making cost have become a big concern to the device manufacturers. This is to say, demands for quality is becoming strenuous because of enormous quantity of data growth with increasing of refined pattern on photo mask manufacture. In the result, massive amount of simulated error occurs on mask inspection that causes lengthening of mask production and inspection period, cost increasing, and long delivery time. In a sense, it is a trade-off between the high accuracy RET and the mask production cost, while it gives a significant impact on the semiconductor market centered around the mask business. To cope with the problem, we propose the best method of a DFM solution using two-dimensional metrology for refined pattern.

A Mobile System for Measuring Water Surface Velocities Using Unmanned Aerial Vehicle and Large-Scale Particle Image Velocimetry

NASA Astrophysics Data System (ADS)

Chen, Y. L.

2015-12-01

Measurement technologies for velocity of river flow are divided into intrusive and nonintrusive methods. Intrusive method requires infield operations. The measuring process of intrusive methods are time consuming, and likely to cause damages of operator and instrument. Nonintrusive methods require fewer operators and can reduce instrument damages from directly attaching to the flow. Nonintrusive measurements may use radar or image velocimetry to measure the velocities at the surface of water flow. The image velocimetry, such as large scale particle image velocimetry (LSPIV) accesses not only the point velocity but the flow velocities in an area simultaneously. Flow properties of an area hold the promise of providing spatially information of flow fields. This study attempts to construct a mobile system UAV-LSPIV by using an unmanned aerial vehicle (UAV) with LSPIV to measure flows in fields. The mobile system consists of a six-rotor UAV helicopter, a Sony nex5T camera, a gimbal, an image transfer device, a ground station and a remote control device. The activate gimbal helps maintain the camera lens orthogonal to the water surface and reduce the extent of images being distorted. The image transfer device can monitor the captured image instantly. The operator controls the UAV by remote control device through ground station and can achieve the flying data such as flying height and GPS coordinate of UAV. The mobile system was then applied to field experiments. The deviation of velocities measured by UAV-LSPIV of field experiments and handhold Acoustic Doppler Velocimeter (ADV) is under 8%. The results of the field experiments suggests that the application of UAV-LSPIV can be effectively applied to surface flow studies.

ISSUES IN DIGITAL IMAGE PROCESSING OF AERIAL PHOTOGRAPHY FOR MAPPING SUBMERSED AQUATIC VEGETATION

EPA Science Inventory

The paper discusses the numerous issues that needed to be addressed when developing a methodology for mapping Submersed Aquatic Vegetation (SAV) from digital aerial photography. Specifically, we discuss 1) choice of film; 2) consideration of tide and weather constraints; 3) in-s...

Optics for Processes, Products and Metrology

NASA Astrophysics Data System (ADS)

Mather, George

1999-04-01

Optical physics has a variety of applications in industry, including process inspection, coatings development, vision instrumentation, spectroscopy, and many others. Optics has been used extensively in the design of solar energy collection systems and coatings, for example. Also, with the availability of good CCD cameras and fast computers, it has become possible to develop real-time inspection and metrology devices that can accommodate the high throughputs encountered in modern production processes. More recently, developments in moiré interferometry show great promise for applications in the basic metals and electronics industries. The talk will illustrate applications of optics by discussing process inspection techniques for defect detection, part dimensioning, birefringence measurement, and the analysis of optical coatings in the automotive, glass, and optical disc industries. In particular, examples of optical techniques for the quality control of CD-R, MO, and CD-RW discs will be presented. In addition, the application of optical concepts to solar energy collector design and to metrology by moiré techniques will be discussed. Finally, some of the modern techniques and instruments used for qualitative and quantitative material analysis will be presented.

A workflow for extracting plot-level biophysical indicators from aerially acquired multispectral imagery

USDA-ARS?s Scientific Manuscript database

Advances in technologies associated with unmanned aerial vehicles (UAVs) has allowed for researchers, farmers and agribusinesses to incorporate UAVs coupled with various imaging systems into data collection activities and aid expert systems for making decisions. Multispectral imageries allow for a q...

Advanced in-line metrology strategy for self-aligned quadruple patterning

NASA Astrophysics Data System (ADS)

Chao, Robin; Breton, Mary; L'herron, Benoit; Mendoza, Brock; Muthinti, Raja; Nelson, Florence; De La Pena, Abraham; Le, Fee li; Miller, Eric; Sieg, Stuart; Demarest, James; Gin, Peter; Wormington, Matthew; Cepler, Aron; Bozdog, Cornel; Sendelbach, Matthew; Wolfling, Shay; Cardinal, Tom; Kanakasabapathy, Sivananda; Gaudiello, John; Felix, Nelson

2016-03-01

Self-Aligned Quadruple Patterning (SAQP) is a promising technique extending the 193-nm lithography to manufacture structures that are 20nm half pitch or smaller. This process adopts multiple sidewall spacer image transfers to split a rather relaxed design into a quarter of its original pitch. Due to the number of multiple process steps required for the pitch splitting in SAQP, the process error propagates through each deposition and etch, and accumulates at the final step into structure variations, such as pitch walk and poor critical dimension uniformity (CDU). They can further affect the downstream processes and lower the yield. The impact of this error propagation becomes significant for advanced technology nodes when the process specifications of device design CD requirements are at nanometer scale. Therefore, semiconductor manufacturing demands strict in-line process control to ensure a high process yield and improved performance, which must rely on precise measurements to enable corrective actions and quick decision making for process development. This work aims to provide a comprehensive metrology solution for SAQP. During SAQP process development, the challenges in conventional in-line metrology techniques start to surface. For instance, critical-dimension scanning electron microscopy (CDSEM) is commonly the first choice for CD and pitch variation control. However, it is found that the high aspect ratio at mandrel level processes and the trench variations after etch prevent the tool from extracting the true bottom edges of the structure in order to report the position shift. On the other hand, while the complex shape and variations can be captured with scatterometry, or optical CD (OCD), the asymmetric features, such as pitch walk, show low sensitivity with strong correlations in scatterometry. X-ray diffraction (XRD) is known to provide useful direct measurements of the pitch walk in crystalline arrays, yet the data analysis is influenced by the incoming

Cooperative Surveillance and Pursuit Using Unmanned Aerial Vehicles and Unattended Ground Sensors

PubMed Central

Las Fargeas, Jonathan; Kabamba, Pierre; Girard, Anouck

2015-01-01

This paper considers the problem of path planning for a team of unmanned aerial vehicles performing surveillance near a friendly base. The unmanned aerial vehicles do not possess sensors with automated target recognition capability and, thus, rely on communicating with unattended ground sensors placed on roads to detect and image potential intruders. The problem is motivated by persistent intelligence, surveillance, reconnaissance and base defense missions. The problem is formulated and shown to be intractable. A heuristic algorithm to coordinate the unmanned aerial vehicles during surveillance and pursuit is presented. Revisit deadlines are used to schedule the vehicles' paths nominally. The algorithm uses detections from the sensors to predict intruders' locations and selects the vehicles' paths by minimizing a linear combination of missed deadlines and the probability of not intercepting intruders. An analysis of the algorithm's completeness and complexity is then provided. The effectiveness of the heuristic is illustrated through simulations in a variety of scenarios. PMID:25591168

Detection of Tree Crowns Based on Reclassification Using Aerial Images and LIDAR Data

NASA Astrophysics Data System (ADS)

Talebi, S.; Zarea, A.; Sadeghian, S.; Arefi, H.

2013-09-01

Tree detection using aerial sensors in early decades was focused by many researchers in different fields including Remote Sensing and Photogrammetry. This paper is intended to detect trees in complex city areas using aerial imagery and laser scanning data. Our methodology is a hierarchal unsupervised method consists of some primitive operations. This method could be divided into three sections, in which, first section uses aerial imagery and both second and third sections use laser scanners data. In the first section a vegetation cover mask is created in both sunny and shadowed areas. In the second section Rate of Slope Change (RSC) is used to eliminate grasses. In the third section a Digital Terrain Model (DTM) is obtained from LiDAR data. By using DTM and Digital Surface Model (DSM) we would get to Normalized Digital Surface Model (nDSM). Then objects which are lower than a specific height are eliminated. Now there are three result layers from three sections. At the end multiplication operation is used to get final result layer. This layer will be smoothed by morphological operations. The result layer is sent to WG III/4 to evaluate. The evaluation result shows that our method has a good rank in comparing to other participants' methods in ISPRS WG III/4, when assessed in terms of 5 indices including area base completeness, area base correctness, object base completeness, object base correctness and boundary RMS. With regarding of being unsupervised and automatic, this method is improvable and could be integrate with other methods to get best results.

Very Large Scale Aerial (VLSA) imagery for assessing postfire bitterbrush recovery

Treesearch

Corey A. Moffet; J. Bret Taylor; D. Terrance Booth

2008-01-01

Very large scale aerial (VLSA) imagery is an efficient tool for monitoring bare ground and cover on extensive rangelands. This study was conducted to determine whether VLSA images could be used to detect differences in antelope bitterbrush (Purshia tridentata Pursh DC) cover and density among similar ecological sites with varying postfire recovery...

Coordinate metrology of a primary surface composite panel from the Large Millimeter Telescope

NASA Astrophysics Data System (ADS)

Gale, David M.; Lucero Álvarez, Maribel; Cabrera Cuevas, Lizeth; Leon-Huerta, Andrea; Arizmendi Reyes, Edgar; Icasio Hernández, Octavio; Castro Santos, David; Hernández Ríos, Emilio; Tecuapetla Sosa, Esteban; Tzile Torres, Carlos; Viliesid Alonso, Miguel

2016-07-01

The Large Millimeter Telescope (LMT) is a single-dish fully-steerable radio telescope presently operating with a 32.5 m parabolic primary reflector, in the process of extension to 50 m. The project is managed by the Instituto Nacional de Astrofísica, Óptica y Electrónica (INAOE) in México, and the University of Massachusetts Amherst, USA. A laminated surface panel from the LMT primary reflector has been subjected to a surface measurement assay at Mexico's National Metrology Center (CENAM). Data obtained using a coordinate measuring machine and laser tracker owned by CENAM is compared with measurements using an identical model laser tracker and the photogrammetry technique, the latter systems owned and operated by the LMT. All measurements were performed within the controlled metrology environment at CENAM. The measurement exercise is intended to prepare the groundwork for converting this spare surface panel into a calibrated work-piece. The establishment of a calibrated work-piece provides quality assurance for metrology through measurement traceability. It also simplifies the evaluation of measurement uncertainty for coordinate metrology procedures used by the LMT project during reflector surface qualification.

Surveying a Landslide in a Road Embankment Using Unmanned Aerial Vehicle Photogrammetry

NASA Astrophysics Data System (ADS)

Carvajal, F.; Agüera, F.; Pérez, M.

2011-09-01

Most of the works of civil engineering, and some others applications, need to be designed using a basic cartography with a suitable scale to the accuracy and extension of the plot.The Unmanned Aerial Vehicle (UAV) Photogrammetry covers the gap between classical manned aerial photogrammetry and hand- made surveying techniques because it works in the close-range domain, combining aerial and terrestrial photogrammetry, but also introduces low-cost alternatives. The aim of this work is developing of an accurate and low-cost method to characterize landslides located on the size of a road. It was applied at the kilometric point 339 belonging to the A92 dual carriageway, in the Abla municipal term, province of Almeria, Spain. A photogrammetric project was carried out from a set of images taken from an md4-200 Microdrones with an on-board calibrated camera 12 Megapixels Pentax Optio A40. The flight was previously planned to cover the whole extension of the embankment with three passes composed of 18 photos each one. All the images were taken with the vertical axe and it was registered 85% and 60% longitudinal and transversal overlaps respectively. The accuracy of the products, with planimetric and altimetric errors of 0.049 and 0.108m repectively, lets to take measurements of the landslide and projecting preventive and palliative actuations.

Relativistic quantum metrology: exploiting relativity to improve quantum measurement technologies.

PubMed

Ahmadi, Mehdi; Bruschi, David Edward; Sabín, Carlos; Adesso, Gerardo; Fuentes, Ivette

2014-05-22

We present a framework for relativistic quantum metrology that is useful for both Earth-based and space-based technologies. Quantum metrology has been so far successfully applied to design precision instruments such as clocks and sensors which outperform classical devices by exploiting quantum properties. There are advanced plans to implement these and other quantum technologies in space, for instance Space-QUEST and Space Optical Clock projects intend to implement quantum communications and quantum clocks at regimes where relativity starts to kick in. However, typical setups do not take into account the effects of relativity on quantum properties. To include and exploit these effects, we introduce techniques for the application of metrology to quantum field theory. Quantum field theory properly incorporates quantum theory and relativity, in particular, at regimes where space-based experiments take place. This framework allows for high precision estimation of parameters that appear in quantum field theory including proper times and accelerations. Indeed, the techniques can be applied to develop a novel generation of relativistic quantum technologies for gravimeters, clocks and sensors. As an example, we present a high precision device which in principle improves the state-of-the-art in quantum accelerometers by exploiting relativistic effects.

Unmanned Aerial Vehicle (UAV) associated DTM quality evaluation and hazard assessment

NASA Astrophysics Data System (ADS)

Huang, Mei-Jen; Chen, Shao-Der; Chao, Yu-Jui; Chiang, Yi-Lin; Chang, Kuo-Jen

2014-05-01

Taiwan, due to the high seismicity and high annual rainfall, numerous landslides triggered every year and severe impacts affect the island. Concerning to the catastrophic landslides, the key information of landslide, including range of landslide, volume estimation and the subsequent evolution are important when analyzing the triggering mechanism, hazard assessment and mitigation. Thus, the morphological analysis gives a general overview for the landslides and been considered as one of the most fundamental information. We try to integrate several technologies, especially by Unmanned Aerial Vehicle (UAV) and multi-spectral camera, to decipher the consequence and the potential hazard, and the social impact. In recent years, the remote sensing technology improves rapidly, providing a wide range of image, essential and precious information. Benefited of the advancing of informatics, remote-sensing and electric technologies, the Unmanned Aerial Vehicle (UAV) photogrammetry mas been improve significantly. The study tries to integrate several methods, including, 1) Remote-sensing images gathered by Unmanned Aerial Vehicle (UAV) and by aerial photos taken in different periods; 2) field in-situ geologic investigation; 3) Differential GPS, RTK GPS and Ground LiDAR field in-site geoinfomatics measurements; 4) Construct the DTMs before and after landslide, as well as the subsequent periods using UAV and aerial photos; 5) Discrete element method should be applied to understand the geomaterial composing the slope failure, for predicting earthquake-induced and rainfall-induced landslides displacement. First at all, we evaluate the Microdrones MD4-1000 UAV airphotos derived Digital Terrain Model (DTM). The ground resolution of the DSM point cloud of could be as high as 10 cm. By integrated 4 ground control point within an area of 56 hectares, compared with LiDAR DSM and filed RTK-GPS surveying, the mean error is as low as 6cm with a standard deviation of 17cm. The quality of the

In-die photomask registration and overlay metrology with PROVE using 2D correlation methods

NASA Astrophysics Data System (ADS)

Seidel, D.; Arnz, M.; Beyer, D.

2011-11-01

According to the ITRS roadmap, semiconductor industry drives the 193nm lithography to its limits, using techniques like double exposure, double patterning, mask-source optimization and inverse lithography. For photomask metrology this translates to full in-die measurement capability for registration and critical dimension together with challenging specifications for repeatability and accuracy. Especially, overlay becomes more and more critical and must be ensured on every die. For this, Carl Zeiss SMS has developed the next generation photomask registration and overlay metrology tool PROVE® which serves the 32nm node and below and which is already well established in the market. PROVE® features highly stable hardware components for the stage and environmental control. To ensure in-die measurement capability, sophisticated image analysis methods based on 2D correlations have been developed. In this paper we demonstrate the in-die capability of PROVE® and present corresponding measurement results for shortterm and long-term measurements as well as the attainable accuracy for feature sizes down to 85nm using different illumination modes and mask types. Standard measurement methods based on threshold criteria are compared with the new 2D correlation methods to demonstrate the performance gain of the latter. In addition, mask-to-mask overlay results of typical box-in-frame structures down to 200nm feature size are presented. It is shown, that from overlay measurements a reproducibility budget can be derived that takes into account stage, image analysis and global effects like mask loading and environmental control. The parts of the budget are quantified from measurement results to identify critical error contributions and to focus on the corresponding improvement strategies.

Nano-metrology and terrain modelling - convergent practice in surface characterisation

USGS Publications Warehouse

Pike, R.J.

2000-01-01

The quantification of magnetic-tape and disk topography has a macro-scale counterpart in the Earth sciences - terrain modelling, the numerical representation of relief and pattern of the ground surface. The two practices arose independently and continue to function separately. This methodological paper introduces terrain modelling, discusses its similarities to and differences from industrial surface metrology, and raises the possibility of a unified discipline of quantitative surface characterisation. A brief discussion of an Earth-science problem, subdividing a heterogeneous terrain surface from a set of sample measurements, exemplifies a multivariate statistical procedure that may transfer to tribological applications of 3-D metrological height data.

Through-silicon via plating void metrology using focused ion beam mill

NASA Astrophysics Data System (ADS)

Rudack, A. C.; Nadeau, J.; Routh, R.; Young, R. J.

2012-03-01

3D IC integration continues to increase in complexity, employing advanced interconnect technologies such as throughsilicon vias (TSVs), wafer-to-wafer (W2W) bonding, and multi-chip stacking. As always, the challenge with developing new processes is to get fast, effective feedback to the integration engineer. Ideally this data is provided by nondestructive in-line metrology, but this is not always possible. For example, some form of physical cross-sectioning is still the most practical way to detect and characterize TSV copper plating voids. This can be achieved by cleaving, followed by scanning electron microscope (SEM) inspection. A more effective physical cross-sectioning method has been developed using an automated dual-beam focused ion beam (FIB)-SEM system, in which multiple locations can be sectioned and imaged while leaving the wafer intact. This method has been used routinely to assess copper plating voids over the last 24 months at SEMATECH. FIB-SEM feedback has been used to evaluate new plating chemistries, plating recipes, and process tool requalification after downtime. The dualbeam FIB-SEM used for these studies employs a gallium-based liquid metal ion source (LMIS). The overall throughput of relatively large volumes being milled is limited to 3-4 hours per section due to the maximum available beam current of 20 nA. Despite the larger volumetric removal rates of other techniques (e.g., mechanical polishing, broad-ion milling, and laser ablation), the value of localized, site-specific, and artifact-free FIB milling is well appreciated. The challenge, therefore, has been to reap the desired FIB benefits, but at faster volume removal rates. This has led to several system and technology developments for improving the throughput of the FIB technique, the most recent being the introduction of FIBs based on an inductively coupled plasma (ICP) ion source. The ICP source offers much better performance than the LMIS at very high beam currents, enabling more than

An Assessment of Critical Dimension Small Angle X-ray Scattering Metrology for Advanced Semiconductor Manufacturing

DOE Office of Scientific and Technical Information (OSTI.GOV)

Settens, Charles M.

2015-01-01

Simultaneous migration of planar transistors to FinFET architectures, the introduction of a plurality of materials to ensure suitable electrical characteristics, and the establishment of reliable multiple patterning lithography schemes to pattern sub-10 nm feature sizes imposes formidable challenges to current in-line dimensional metrologies. Because the shape of a FinFET channel cross-section immediately influences the electrical characteristics, the evaluation of 3D device structures requires measurement of parameters beyond traditional critical dimension (CD), including their sidewall angles, top corner rounding and footing, roughness, recesses and undercuts at single nanometer dimensions; thus, metrologies require sub-nm and approaching atomic level measurement uncertainty. Synchrotron criticalmore » dimension small angle X-ray scattering (CD-SAXS) has unique capabilities to non-destructively monitor the cross-section shape of surface structures with single nanometer uncertainty and can perform overlay metrology to sub-nm uncertainty. In this dissertation, we perform a systematic experimental investigation using CD-SAXS metrology on a hierarchy of semiconductor 3D device architectures including, high-aspect-ratio contact holes, H2 annealed Si fins, and a series of grating type samples at multiple points along a FinFET fabrication process increasing in structural intricacy and ending with fully fabricated FinFET. Comparative studies between CD-SAXS metrology and other relevant semiconductor dimensional metrologies, particularly CDSEM, CD-AFM and TEM are used to determine physical limits of CD-SAXS approach for advanced semiconductor samples. CD-SAXS experimental tradeoffs, advice for model-dependent analysis and thoughts on the compatibility with a semiconductor manufacturing environment are discussed.« less

Influence of the air’s refractive index on precision angle metrology with autocollimators

NASA Astrophysics Data System (ADS)

Geckeler, Ralf D.; Křen, Petr; Just, Andreas; Schumann, Matthias; Krause, Michael

2018-07-01

In this paper, we discuss a substantial—though previously neglected—error source in precision metrology with autocollimators, specifically, changes in the air’s refractive index, with a focus on the dominant impact of pressure changes. Pressure decreases with increasing elevation above sea level and is subject to substantial variation due to weather changes. It causes changes in an autocollimator’s angle response which are proportional to the measured angle and which increase linearly with the beam length and air pressure. We characterise this important influence in detail by using extended theoretical and experimental investigations and derive strategies for correcting it. We discuss its implications for the comparison of autocollimator calibrations performed at different metrology institutes which is crucial for validating their calibration capabilities. This work aims at approaching fundamental limits in angle metrology with autocollimators.

Pipeline monitoring with unmanned aerial vehicles

NASA Astrophysics Data System (ADS)

Kochetkova, L. I.

2018-05-01

Pipeline leakage during transportation of combustible substances leads to explosion and fire thus causing death of people and destruction of production and accommodation facilities. Continuous pipeline monitoring allows identifying leaks in due time and quickly taking measures for their elimination. The paper describes the solution of identification of pipeline leakage using unmanned aerial vehicles. It is recommended to apply the spectral analysis with input RGB signal to identify pipeline damages. The application of multi-zone digital images allows defining potential spill of oil hydrocarbons as well as possible soil pollution. The method of multi-temporal digital images within the visible region makes it possible to define changes in soil morphology for its subsequent analysis. The given solution is cost efficient and reliable thus allowing reducing timing and labor resources in comparison with other methods of pipeline monitoring.

Optical truss and retroreflector modeling for picometer laser metrology

NASA Astrophysics Data System (ADS)

Hines, Braden E.

1993-09-01

Space-based astrometric interferometer concepts typically have a requirement for the measurement of the internal dimensions of the instrument to accuracies in the picometer range. While this level of resolution has already been achieved for certain special types of laser gauges, techniques for picometer-level accuracy need to be developed to enable all the various kinds of laser gauges needed for space-based interferometers. Systematic errors due to retroreflector imperfections become important as soon as the retroreflector is allowed to either translate in position or articulate in angle away from its nominal zero-point. Also, when combining several laser interferometers to form a three-dimensional laser gauge (a laser optical truss), systematic errors due to imperfect knowledge of the truss geometry are important as the retroreflector translates away from its nominal zero-point. In order to assess the astrometric performance of a proposed instrument, it is necessary to determine how the effects of an imperfect laser metrology system impact the astrometric accuracy. This paper show the development of an error propagation model from errors in the 1-D metrology measurements through the impact on the overall astrometric accuracy for OSI. Simulations are then presented based on this development which were used to define a multiplier which determines the 1-D metrology accuracy required to produce a given amount of fringe position error.

Unmanned aerial monitoring of fluvial changes in the vicinity of selected gauges of the Local System for Flood Monitoring in Klodzko County, SW Poland

NASA Astrophysics Data System (ADS)

Jeziorska, Justyna; Witek, Matylda; Niedzielski, Tomasz

2013-04-01

Only high resolution spatial data enable precise measurements of various morphometric characteristics of river channels and ensure meaningful effects of research into fluvial changes. Using ground-based measurement tools is time-consuming and expensive. Traditional photogrammetry often does not reach a desired resolution, and the technology is cost effective only for the large-area coverage. The present research introduces potentials of UAV (Unmanned Aerial Vehicle) for monitoring fluvial changes. Observations were carried out with the ultralight UAV swinglet CAM produced by senseFly. This lightweight (0,5 kg), small (wingspan: 80 cm) aircraft allowed frequent (with approximately monthly sampling resolution) and low-cost missions. Three hydrologic gauges, the surroundings of which were the target of series of photos taken by camera placed in airplane frame, belong to the Local System for Flood Monitoring in Kłodzko County (SW Poland). The only way of obtaining reliable results is an appropriate image rectification, in order to measure morphometric characteristics of terrain, free of geometrical deformations induced by the topographical relief, the tilt of the camera axis and the distortion of the optics. Commercially available software for the production of digital orthophotos and digital surface models (DSMs) from a range of uncalibrated oblique and vertical aerial images was successfully used to achieve this aim. As a result of completing the above procedure 9 orthophotos were generated (one for each of 3 study areas during 3 missions). For extraction of terrain parameters, a DSM was produced as a result of bundle block adjustment. Both products reached ultra-high resolution of 4cm/px. Various fluvial forms were classified and recognized, and a few time series of maps from each study area were compared in order to detect potential changes within the fluvial system. We inferred on the origins of the short-term responses of fluvial systems, and such an inference

Nonlinear Quantum Metrology of Many-Body Open Systems

NASA Astrophysics Data System (ADS)

Beau, M.; del Campo, A.

2017-07-01

We introduce general bounds for the parameter estimation error in nonlinear quantum metrology of many-body open systems in the Markovian limit. Given a k -body Hamiltonian and p -body Lindblad operators, the estimation error of a Hamiltonian parameter using a Greenberger-Horne-Zeilinger state as a probe is shown to scale as N-[k -(p /2 )], surpassing the shot-noise limit for 2 k >p +1 . Metrology equivalence between initial product states and maximally entangled states is established for p ≥1 . We further show that one can estimate the system-environment coupling parameter with precision N-(p /2 ), while many-body decoherence enhances the precision to N-k in the noise-amplitude estimation of a fluctuating k -body Hamiltonian. For the long-range Ising model, we show that the precision of this parameter beats the shot-noise limit when the range of interactions is below a threshold value.

Measuring optical phase digitally in coherent metrology systems

NASA Astrophysics Data System (ADS)

Kelly, Damien P.; Ryle, James; Zhao, Liang; Sheridan, John T.

2017-05-01

The accurate measurement of optical phase has many applications in metrology. For biological samples, which appear transparent, the phase data provides information about the refractive index of the sample. In speckle metrology, the phase can be used to estimate stress and strains of a rough surface with high sensitivity. In this theoretical manuscript we compare and contrast the properties of two techniques for estimating the phase distribution of a wave field under the paraxial approximation: (I) A digital holographic system, and (II) An idealized phase retrieval system. Both systems use a CCD or CMOS array to measure the intensities of the wave fields that are reflected from or transmitted through the sample of interest. This introduces a numerical aspect to the problem. For the two systems above we examine how numerical calculations can limit the performance of these systems leading to a near-infinite number of possible solutions.

Importance of education and competence maintenance in metrology field (measurement science)

NASA Astrophysics Data System (ADS)

Dobiliene, J.; Meskuotiene, A.

2015-02-01

For certain tasks in metrology field trained employers might be necessary to fulfill specific requirements. It is important to pay attention that metrologists are responsible for fluent work of devices that belong to huge variety of vide spectrum of measurements. People who perform measurements (that are related to our safety, security or everyday life) with reliable measuring instruments must be sure for trueness of their results or conclusions. So with the purpose to reach the harmony between the ordinary man and his used means it is very important to ensure competence of specialists that are responsible for mentioned harmony implementation. Usually these specialists have a university degree and perform highly specified tasks in science, industry or laboratories. Their task is quite narrow. For example, type approval of measuring instrument or calibration and verification. Due to the fact that the number of such employers and their tasks is relatively small in the field of legal metrology, this paper focuses on the significance of training and qualification of legal metrology officers.

In-line height profiling metrology sensor for zero defect production control

NASA Astrophysics Data System (ADS)

Snel, Rob; Winters, Jasper; Liebig, Thomas; Jonker, Wouter

2017-06-01

Contemporary production systems of mechanical precision parts show challenges as increased complexity, tolerances shrinking to sub-microns and yield losses that must be mastered to the extreme. More advanced automation and process control is required to accomplish this task. Often a solution based on feedforward/feedback control is chosen requiring innovative and more advanced in line metrology. This article concentrates first on the context of in line metrology for process control and then on the development of a specific in line height profiling sensor. The novel sensor technology is based on full field time domain white light interferometry which is well know from the quality lab. The novel metrology system is to be mounted close to the production equipment, as required to minimize time delay in the control loop, and is thereby fully exposed to vibrations. This sensor is innovated to perform in line with an orders of magnitude faster throughput than laboratory instruments; it's robust to withstand the rigors of workshops and has a height resolution that is in the nanometer range.

The Art of Aerial Warfare

DTIC Science & Technology

2005-03-01

14 3 THE POLITICAL DIMENSIONS OF AERIAL WARFARE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17 How Political Effects in...Aerial Warfare . . . . . . Outweigh Military Effects . . . . . . . . . . . . . . . 19 Political Targets Versus Military Targets . . . . . 22...34 4 MILITARY AND POLITICAL EFFECTS OF STRATEGIC ATTACK . . . . . . . . . . . . . . . . . . 35 The Premise of

47 CFR 32.6431 - Aerial wire expense.

Code of Federal Regulations, 2010 CFR

2010-10-01

... 47 Telecommunication 2 2010-10-01 2010-10-01 false Aerial wire expense. 32.6431 Section 32.6431... FOR TELECOMMUNICATIONS COMPANIES Instructions for Expense Accounts § 32.6431 Aerial wire expense. This account shall include expenses associated with aerial wire. ...

47 CFR 32.6431 - Aerial wire expense.

Code of Federal Regulations, 2011 CFR

2011-10-01

... 47 Telecommunication 2 2011-10-01 2011-10-01 false Aerial wire expense. 32.6431 Section 32.6431... FOR TELECOMMUNICATIONS COMPANIES Instructions for Expense Accounts § 32.6431 Aerial wire expense. This account shall include expenses associated with aerial wire. ...

Aerial thermography for energy conservation

NASA Technical Reports Server (NTRS)

Jack, J. R.

1978-01-01

Thermal infrared scanning from an aircraft is a convenient and commercially available means for determining relative rates of energy loss from building roofs. The need to conserve energy as fuel costs makes the mass survey capability of aerial thermography an attractive adjunct to community energy awareness programs. Background information on principles of aerial thermography is presented. Thermal infrared scanning systems, flight and environmental requirements for data acquisition, preparation of thermographs for display, major users and suppliers of thermography, and suggested specifications for obtaining aerial scanning services were reviewed.

Instrumentation, metrology, and standards: key elements for the future of nanomanufacturing

NASA Astrophysics Data System (ADS)

Postek, Michael T.; Lyons, Kevin

2007-09-01

Nanomanufacturing is the essential bridge between the discoveries of nanoscience and real world nanotech products and is the vehicle by which the Nation and the World will realize the promise of major technological innovation across a spectrum of products that will affect virtually every industrial sector. For nanotech products to achieve the broad impacts envisioned, they must be manufactured in market-appropriate quantities in a reliable, repeatable, economical and commercially viable manner. In addition, they must be manufactured so that environmental and human health concerns are met, worker safety issues are appropriately assessed and handled, and liability issues are addressed. Critical to this realization of robust nanomanufacturing is the development of the necessary instrumentation, metrology, and standards. Integration of the instruments, their interoperability, and appropriate information management are also critical elements that must be considered for viable nanomanufacturing. Advanced instrumentation, metrology and standards will allow the physical dimensions, properties, functionality, and purity of the materials, processes, tools, systems, products, and emissions that will constitute nanomanufacturing to be measured and characterized. This will in turn enable production to be scaleable, controllable, predictable, and repeatable to meet market needs. If a nano-product cannot be measured it cannot be manufactured; additionally if that product cannot be made safely it should not be manufactured. This presentation introduces the Instrumentation, Metrology, and Standards for Nanomanufacturing Conference at the 2007 SPIE Optics and Photonics. This conference will become the leading forum for the exchange of foundational information and discussion of instrumentation, metrology and standards which are key elements for the success of nanomanufacturing.

Clean focus, dose and CD metrology for CD uniformity improvement

NASA Astrophysics Data System (ADS)

Lee, Honggoo; Han, Sangjun; Hong, Minhyung; Kim, Seungyoung; Lee, Jieun; Lee, DongYoung; Oh, Eungryong; Choi, Ahlin; Kim, Nakyoon; Robinson, John C.; Mengel, Markus; Pablo, Rovira; Yoo, Sungchul; Getin, Raphael; Choi, Dongsub; Jeon, Sanghuck

2018-03-01

Lithography process control solutions require more exacting capabilities as the semiconductor industry goes forward to the 1x nm node DRAM device manufacturing. In order to continue scaling down the device feature sizes, critical dimension (CD) uniformity requires continuous improvement to meet the required CD error budget. In this study we investigate using optical measurement technology to improve over CD-SEM methods in focus, dose, and CD. One of the key challenges is measuring scanner focus of device patterns. There are focus measurement methods based on specially designed marks on scribe-line, however, one issue of this approach is that it will report focus of scribe line which is potentially different from that of the real device pattern. In addition, scribe-line marks require additional design and troubleshooting steps that add complexity. In this study, we investigated focus measurement directly on the device pattern. Dose control is typically based on using the linear correlation behavior between dose and CD. The noise of CD measurement, based on CD-SEM for example, will not only impact the accuracy, but also will make it difficult to monitor dose signature on product wafers. In this study we will report the direct dose metrology result using an optical metrology system which especially enhances the DUV spectral coverage to improve the signal to noise ratio. CD-SEM is often used to measure CD after the lithography step. This measurement approach has the advantage of easy recipe setup as well as the flexibility to measure critical feature dimensions, however, we observe that CD-SEM metrology has limitations. In this study, we demonstrate within-field CD uniformity improvement through the extraction of clean scanner slit and scan CD behavior by using optical metrology.

Spectroscopic metrology for isotope composition measurements and transfer standards

NASA Astrophysics Data System (ADS)

Anyangwe Nwaboh, Javis; Balslev-Harder, David; Kääriäinen, Teemu; Richmond, Craig; Manninen, Albert; Mohn, Joachim; Kiseleva, Maria; Petersen, Jan C.; Werhahn, Olav; Ebert, Volker

2017-04-01

The World Meteorological Organization (WMO) has identified greenhouse gases such as CO2, CH4 and N2O as critical for global climate monitoring. Other molecules such as CO that has an indirect effect of enhancing global warming are also monitored. WMO has stated compatibility goals for atmospheric concentration and isotope ratio measurements of these gases, e.g. 0.1 ppm for CO2 concentration measurements in the northern hemisphere and 0.01 ‰ for δ13C-CO2. For measurements of the concentration of greenhouse gases, gas analysers are typically calibrated with static gas standards e.g. traceable to the WMO scale or to the International System of Units (SI) through a national metrology institute. However, concentrations of target components, e.g. CO, in static gas standards have been observed to drift, and typically the gas matrix as well as the isotopic composition of the target component does not always reflect field gas composition, leading to deviations of the analyser response, even after calibration. The deviations are dependent on the measurement technique. To address this issue, part of the HIGHGAS (Metrology for high-impact greenhouse gases) project [1] focused on the development of optical transfer standards (OTSs) for greenhouse gases, e.g. CO2 and CO, potentially complementing gas standards. Isotope ratio mass spectrometry (IRMS) [2] is currently used to provide state-of-the-art high precision (in the 0.01 ‰ range) measurements for the isotopic composition of greenhouse gases. However, there is a need for field-deployable techniques such as optical isotope ratio spectroscopy (OIRS) that can be combined with metrological measurement methods. Within the HIGHGAS project, OIRS methods and procedures based on e.g. cavity enhanced spectroscopy (CES) and tunable diode laser absorption spectroscopy (TDLAS), matched to metrological principles have been established for the measurement of 13C/12C and 18O/16O ratios in CO2, 15N/14N ratios in N2O, and 13C/12C and 2H

Formation metrology and control for large separated optics space telescopes

NASA Technical Reports Server (NTRS)

Mettler, E.; Quadrelli, M.; Breckenridge, W.

2002-01-01

In this paper we present formation flying performance analysis initial results for a representative large space telescope composed of separated optical elements [Mett 02]. A virtual-structure construct (an equivalent rigid body) is created by unique metrology and control that combines both centralized and decentralized methods. The formation may be in orbit at GEO for super-resolution Earth observation, as in the case of Figure 1, or it may be in an Earth-trailing orbit for astrophysics, Figure 2. Extended applications are envisioned for exo-solar planet interferometric imaging by a formation of very large separated optics telescopes, Figure 3. Space telescopes, with such large apertures and f/10 to f/100 optics, are not feasible if connected by massive metering structures. Instead, the new virtual-structure paradigm of information and control connectivity between the formation elements provides the necessary spatial rigidity and alignment precision for the telescope.

NPL scoops £25m for advanced metrology centre