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Sample records for coupled cf4 plasmas

  1. Simulation and Experimental Measurements of Inductively Coupled CF4 and CF4/Ar Plasmas

    NASA Technical Reports Server (NTRS)

    Hash, D. B.; Bose, D.; Rao, M. V. V. S.; Cruden, B. A.; Meyyappan, M.; Sharma, S. P.; Arnold, James O. (Technical Monitor)

    2000-01-01

    The recently developed code SEMS (semiconductor equipment modeling software)is applied to the simulation of CF4 and CF4/Ar inductively coupled plasmas (ICP). This work builds upon the earlier nitrogen, transformer coupled plasma (TCP) SEMS research by demonstrating its accuracy for more complex reactive mixtures, moving closer to the realization of a virtual plasma reactor. Attention is given to the etching of and/or formation of carbonaceous films on the quartz dielectric window and diagnostic aperatures. The simulations are validated through comparisons with experimental measurements using FTIR (Fourier Transform Infrared) and UV absorption spectroscopy for CFx and SiFx neutral radicals, QMS (quadrupole mass spectrometry) for the ions, and Langmuir probe measurements of electron number density and temperature in an ICP GEC reference cell.

  2. Mode transition in CF4 + Ar inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Liu, Wei; Gao, Fei; Zhao, Shu-Xia; Li, Xue-Chun; Wang, You-Nian

    2013-12-01

    The E to H mode transitions are studied by a hairpin probe and optical emission spectroscopy in inductively coupled CF4 + Ar plasmas. Electron density, optical emission intensity of Ar, and the voltage and current are measured during the E to H mode transitions. It is found that the electron density and plasma emission intensity increase continuously at low pressure during the E to H mode transition, while they jump up discontinuously at high pressure. Meanwhile, the transition threshold power and △P (the power interval between E and H mode) increase by increasing the pressure. When the ratio of CF4 increases, the E to H mode transition happens at higher applied power, and meanwhile, the △P also significantly increases. Besides, the effects of CF4 gas ratio on the plasma properties and the circuit electrical properties in both pure E and H modes were also investigated. The electron density and plasma emission intensity both decrease upon increasing the ratio of CF4 at the two modes, due to the stronger electrons loss scheme. The applied voltages at E and H modes both increase as increasing the CF4 gas ratio, however the applied current at two modes behave just oppositely with the gas ratio.

  3. Nanoscale dry etching of germanium by using inductively coupled CF4 plasma

    NASA Astrophysics Data System (ADS)

    Shim, Kyu-Hwan; Yang, Ha Yong; Kil, Yeon-Ho; Yang, Hyeon Deok; Yang, Jong-Han; Hong, Woong-Ki; Kang, Sukill; Jeong, Tae Soo; Kim, Taek Sung

    2012-08-01

    The nanoscale dry etching of germanium was investigated by using inductively coupled CF4 plasma and electron-beam lithography. The optimal dose of PMMA as E-beam lithography resist was ˜200 mC/cm2. When ICP Power was 200W, CF4 gas flow rate was 40 sccm, and process pressure was 20 mTorr, it had a smooth surface and good etch rate. The etching selectivity of Ge wafer to PMMA resist was as low as ˜1.5. Various sub-100 nm dry-etching patterns have been obtained. SEM pictures showed good profile qualities with a smooth etching sidewall and ultrasmall etching features.

  4. Langmuir Probe Measurements of Inductively Coupled Plasmas in CF4/Ar/O2 Mixtures

    NASA Technical Reports Server (NTRS)

    Rao, M. V. V. S.; Meyyappan, M.; Sharma, S. P.

    2000-01-01

    Fluorocarbon gases, such as CF4, and their mixtures are widely used in contemporary low-pressure and high-density plasma processing techniques. In such plasmas Langmuir probe is one of the most commonly employed diagnostic techniques to obtain electron number density (ne), electron temperature (Te), electron energy distribution function (EEDF), mean electron energy (Ee), ion number density (ni), and plasma potential (Vp). In this paper we report probe data for planar inductively coupled plasmas in CF4/O2/Ar mixtures. By varying the relative concentrations in the mixture, radial profiles of ne, ni, Te, Ee, Vp, EEDF were measured in the mid-plane of the plasma at 10 mTorr and 20 mTorr of gas pressures, and 200 W and 300 W of RF powers. Data show that ne and ni decrease with increase of CF4 content and decrease of gas-pressure but they increase with increase of RF-power, whereas Vp increases with decrease of gas-pressure and remains independent of RF-power. However, they all peak at the center of the plasma and decrease towards the edge while Te follows the other way and increases a little with increase of power. The measured EEDFs exhibit Druyvesteyn-like distribution at all pressures and powers. Data are analyzed and will be presented.

  5. Langmuir Probe Measurements in an Inductively Coupled Ar/CF4 Plasmas

    NASA Technical Reports Server (NTRS)

    Rao, M. V. V. S.; Meyyappan, M.; Sharma, S. P.; Arnold, James O. (Technical Monitor)

    2000-01-01

    Technological advancement in the microelectronics industry requires an understanding of the physical and chemical processes occurring in plasmas of fluorocarbon gases, such as carbon tetrafluoride (CF4) which is commonly used as an etchant, and their mixtures to optimize various operating parameters. In this paper we report data on electron number density (ne), electron temperature'(Te), electron energy distribution function (EEDF), mean electron energy, ion number density (ni), and plasma potential (Vp) measured by using Langmuir probe in an inductively coupled 13.56 MHz radio frequency plasmas generated in 50%Ar:50%CF4 mixture in the GEC cell. The probe data were recorded at various radial positions providing radial profiles of these plasma parameters at 10-50 mTorr pressures and 200 W and 300 W of RF power. Present measurements indicate that the electron and ion number densities increase with increase in pressure and power. Whereas the plasma potential and electron temperature decrease with increase in pressure, and they weakly depend on RF power. The radial profiles exhibit that the electron and ion number densities and the plasma potential peak at the center of the plasma with an exponential fall away from it, while the electron temperature has a minimum at the center and it increases steadily towards the electrode edge. The EEDFs have a characteristic drop near the low energy end at all pressures and pressures and their shapes represent non-Maxwellian plasma and exhibit more like Druyvesteyn energy distribution.v

  6. Langmuir Probe Measurements of Inductively Coupled Plasma in CF4/AR/O2 Mixtures

    NASA Technical Reports Server (NTRS)

    Rao, M. V. V. S.; Cruden, Brett; Sharma, Surendra; Meyyappan, Meyya

    2001-01-01

    Inductively coupled plasmas of CF4:Ar:O2, which have been of importance to material processing, were studied in the GEC cell at 80:10:10, 60:20:20, and 40:30:30 mixture ratios. Radial distributions of plasma potential (V(sub p)), electron and ion number densities (n(sub e) and n(sub i)), electron temperature (T(sub e)), and electron energy distribution functions (EEDFs) were measured in the mid-plane of plasma across the electrodes in the pressure range of 10-50 mTorr, and RF power of 200 and 300 W. V(sub p), n(sub e) and n(sub i), which peak in the center of the plasma, increase with decrease of pressure. T(sub e) also increases with pressure but peaks toward the electrode edge. Both V(sub p) and T(sub e) remain nearly independent of RF power, whereas n(sub e) and n(sub i) increase with power. In all conditions the EEDFs exhibit non-Maxwellian shape and are more like Druyvesteyn form at higher energies. They exhibit a broad lip in the energy range 0-10 eV suggesting an electron loss mechanism, which could be due to via resonance electron attachment processes producing negative ions in this rich electronegative gas mixture. This behavior is more prominent towards the electrode edge.

  7. Langmuir Probe Measurements of Inductively Coupled Plasmas in CF4/Ar/O2 Mixtures

    NASA Technical Reports Server (NTRS)

    Rao, M. V. V. S.; Cruden, Brett; Sharma, Surendra; Meyyappan, Meyya

    2001-01-01

    Inductively coupled plasmas of CF4:Ar:O2, which have been of importance to material processing, were studied in the GEC cell at 80:10:10, 60:20:20, and 40:30:30 mixture ratios. Radial distributions of plasma potential (V(sub p)), electron and ion number densities (n(sub e) and n(sub i), electron temperature (T(sub e)), and electron energy distribution functions (EEDFs) were measured in the mid-plane of plasma across the electrodes in the pressure range of 10-50 mTorr, and RF (radio frequency) power of 200 and 300 W. V(sub p), n(sub e) and n(sub i), which peak in the center of the plasma, increase with decrease of pressure. T(sub e) also increases with pressure but peaks toward the electrode edge. Both V(sub p) and T(sub e) remain nearly independent of RF power, whereas n(sub e) and n(sub i) increase with power. In all conditions the EEDFs exhibit non-Maxwellian shape and are more like Druyvesteyn form at higher energies. They exhibit a broad dip in the energy range 0-10 eV suggesting an electron loss mechanism, which could be due to via resonance electron attachment processes producing negative ions in this rich electronegative gas mixture. This behavior is more prominent towards the electrode edge.

  8. Langmuir Probe and Mass Spectroscopic Measurements in Inductively Coupled CF4 Plasmas

    NASA Technical Reports Server (NTRS)

    Rao, M. V. V. S.; Sharma, Surendra; Cruden, B. A.; Meyyappan, M.

    2001-01-01

    Abstract Electron and ion energy distribution functions and other plasma parameters such as plasma potential (V(sub p)) , electron temperature (T(sub e)), and electron and ion number densities (n (sub e) and n(sub i)) in low pressure CF4 plasmas have been measured. The experiments were conducted in a GEC cell using an inductively coupled plasma (ICP) device powered by a 13.56 MHz radio-frequency (rf) power source. The measurements were made at 300 W of input rf power at 10, 30 and 50 mTorr gas pressures. Langmuir probe measurements suggest that n(sub e), n(sub i) and V(sub p) remain constant over 60% of the central electrode area, beyond which they decrease. Within the limits of experimental error (+/- 0.25 eV), T(sub e) remains nearly constant over the electrode area. T(sub e) and V(sub p) increase with a decrease in pressure. n(sub e) and n(sub i) are not affected as significantly as T(sub e) or V(sub p) by variation in the gas pressure. The electron energy distribution function (EEDF) measurements indicate a highly non-Maxwellian plasma. CF3+ is the most dominant ion product of the plasma, followed by CF2+ and CF+. The concentrations of CF2+ and CF+ are much larger than that is possible from direct electron impact ionization of the parent gas. The cross-section data suggest that the direct electron impact ionization of fragment neutrals and negative ion production by electron attachment may be responsible for increase of the minor ions.

  9. Neutral Gas Temperature Estimates in an Inductively Coupled CF4 Plasma by Fitting Diatomic Emission Spectra

    NASA Technical Reports Server (NTRS)

    Cruden, Brett A.; Rao, M. V. V. S.; Sharma, Surendra P.; Meyyappan, M.

    2001-01-01

    This work examines the accuracy of plasma neutral temperature estimates by fitting the rotational band envelope of different diatomic species in emission. Experiments are performed in an inductively coupled CF4 plasma generated in a Gaseous Electronics Conference reference cell. Visible and ultraviolet emission spectra are collected at a power of 300 W (approximately 0.7 W/cc) and pressure of 30 mtorr. The emission bands of several molecules (CF, CN, C2, CO, and SiF) are fit simultaneously for rotational and vibrational temperatures and compared. Four different rotational temperatures are obtained: 1250 K for CF and CN, 1600 K for CO, 1800 K for C2, and 2300 K for SiF. The vibrational temperatures obtained vary from 1750-5950 K, with the higher vibrational temperatures generally corresponding to the lower rotational temperatures. These results suggest that the different species have achieved different degrees of equilibration between the rotational and vibrational modes and may not be equilibrated with the translational temperatures. The different temperatures are also related to the likelihood that the species are produced by ion bombardment of the surface, with etch products like SiF, CO, and C2 having higher temperatures than species expected to have formed in the gas phase.

  10. Experimental and theoretical study of RF capacitively coupled plasma in Ar-CF4-CF3I mixtures

    NASA Astrophysics Data System (ADS)

    Proshina, O. V.; Rakhimova, T. V.; Lopaev, D. V.; Šamara, V.; Baklanov, M. R.; de Marneffe, J.-F.

    2015-10-01

    Radio frequency capacitively coupled plasma (RF CCP) sustained at RF frequencies of 27 MHz in an Ar-CF4-CF3I gas mixture is studied experimentally and theoretically. The RF CCP in Ar-CF4-CF3I is simulated by using a 1D hybrid particle-in-cell-fluid numerical model. We pay special attention to the changes in plasma structure and fluxes to the electrode, negative ion and neutral radical production with admixture of CF3I in Ar-CF4 plasma. With CF3I admixture the plasma becomes strongly electronegative as a result of the high electron attachment rate to the CF3I molecule. The atomic fluorine density becomes extremely low with addition of CF3I molecules due to the large volume loss in the reaction CF3I + F  →  CF3 + IF. Optical emission spectrometry data on CF2 emission at the wavelength of 250 nm indicate the essential sources of CF2 in CF3I-containing plasma in the studied conditions, although direct dissociation channels for the CF3I molecule with CF2 production have not been studied. Evaluation of CF2 density in Ar-CF4-CF3I plasma was first carried out on the basis of the actinometry technique and numerical simulation. The possible mechanism of ultra-low-k film damage in the studied conditions is also discussed.

  11. Ion Energy and Ion Flux Distributions of CF4/Ar/O2 Inductively Coupled Plasmas in a GEC Cell

    NASA Technical Reports Server (NTRS)

    Rao, M. V. V. S.; Cruden, Brett; Sharma, Surendra; Meyyappan, Meyya

    2001-01-01

    Knowledge of ion kinetics in plasma processing gas mixtures, such as CF4:Ar:O2, is important for understanding plasma assisted etching and deposition of materials. Ion energies and ion fluxes were measured in this mixture for 80:10:10, 60:20:20, and 40:30:30 mixture ratios in the pressure range of 10-50 mTorr, and at 200 and 300 W of RF power. Ions from plasma, sampled through a 10 micron orifice in the center of the lower plane electrode, were energy and mass analyzed by a combination of electrostatic energy and quadrupole mass filters. CFx(+) (x = 1 - 3), F2(+), F(+), C(+) from CF4, Ar(+) from Ar, and O2(+) and O(+) from O2, and by-product ions SiFx(+)(x = 1 - 3) from etching of quartz coupling window, COFx(+)(x = 1 - 3), CO(+), CO2(+), and OF(+) were detected. In all conditions ion flux decreases with increase of pressure but increase with increase of RF power. Ar(+) signal decreases with increase of pressure while CF3(+), which is the dominant ion at all conditions, increases with increase in pressure. The loss mechanism for Ar(+) and increase of CF3(+) is due to large cross section for Ar(+) + CF4 yields Ar + CF3(+) + F. Ion energies, which range from 15-25 eV depending on plasma operating conditions, are nearly Gaussian. By-product ion signals are higher at lower pressures indicating stronger plasma interaction with quartz window.

  12. Etching characteristics and mechanisms of Mo thin films in Cl2/Ar and CF4/Ar inductively coupled plasmas

    NASA Astrophysics Data System (ADS)

    Lim, Nomin; Efremov, Alexander; Yeom, Geun Young; Choi, Bok-Gil; Kwon, Kwang-Ho

    2014-11-01

    The etching characteristics and mechanism of Mo thin films in Cl2/Ar and CF4/Ar inductively coupled plasmas under the same operating conditions (pressure, 6 mTorr; input power, 700 W; bias power, 200 W) were investigated. For both gas mixtures, an increase in the Ar fraction or gas pressure at a fixed gas mixing ratio was found to cause a non-monotonic change in the Mo etching rates. The X-ray photoelectron spectroscopy (XPS) diagnostics indicated contamination of the etched surfaces by reaction products. The Cl2/Ar and CF4/Ar plasma parameters were also investigated using a combination of a zero-dimensional plasma model and plasma diagnostics using Langmuir probes. An analysis of the etching kinetics with the model-predicted fluxes of the plasma active species suggests that: 1) the Mo etching process occurs in the transitional regime of the ion-assisted chemical reaction, and 2) the non-monotonic Mo etching rate is probably associated with opposing changes in the fluxes of the reactive neutral species and ion energy.

  13. Measurements of Ion Energy and Ion Flux Distributions in Inductively Coupled Plasmas in CF4/O2/Ar Mixtures

    NASA Technical Reports Server (NTRS)

    Rao, M. V. V. S.; Kim, J. S.; Cappelli, M. A.; Sharma, Surendra; Partridge, Harry (Technical Monitor)

    1999-01-01

    We report mass spectrometric studies of energy distributions and absolute concentrations of ions generated in CF4/O2/Ar inductively coupled rf plasmas. The ions were collected through a 100 mm orifice in the grounded and water cooled lower electrode in a GEC cell configuration. The measurements were made at gas pressures in the 10-50 mTorr range and rf coil power in the 100-300 W range. The observed ions are CF3(+), CF2(+), CF(+), C(+), F(+), COF(+), CO(+), O2(+), and O(+). The relative abundance of these ions varies with pressure and rf power. The energy distribution and absolute concentrations are correlated with electron number density and floating plasma potential measured by a compensated Langmuir probe.

  14. High density plasma etching of ultrananocrystalline diamond films in O2/CF4 and O2/SF6 inductively coupled plasmas

    NASA Astrophysics Data System (ADS)

    Park, Jong Cheon; Kim, Seong Hak; Kim, Tae Gyu; Kim, Jin Kon; Cho, Hyun; Lee, Byeong Woo

    2015-03-01

    Inductively coupled plasma etching of ultrananocrystalline diamond (UNCD) films was performed in O2/CF4 and O2/SF6 discharges. Higher etch rates were produced for the O2/SF6 discharges and the films etched in the 10O2/5CF4 discharges retained smooth surface morphology similar to the unetched control sample. Al mask showed a good etch selectivity to the UNCD for both plasma chemistries and highly anisotropic pattern transfer with a vertical sidewall profile was achieved.

  15. Application of Si and SiO2 Etching Mechanisms in CF4/C4F8/Ar Inductively Coupled Plasmas for Nanoscale Patterns.

    PubMed

    Lee, Junmyung; Efremov, Alexander; Yeom, Geun Young; Lim, Nomin; Kwon, Kwang-Ho

    2015-10-01

    An investigation of the etching characteristics and mechanism for both Si and SiO2 in CF4/C4F8/Ar inductively coupled plasmas under a constant gas pressure (4 mTorr), total gas flow rate (40 sccm), input power (800 W), and bias power (150 W) was performed. It was found that the variations in the CF4/C4F8 mixing ratio in the range of 0-50% at a constant Ar fraction of 50% resulted in slightly non-monotonic Si and SiO2 etching rates in CF4-rich plasmas and greatly decreasing etching rates in C4F8-rich plasmas. The zero-dimensional plasma model, Langmuir probe diagnostics, and optical emission spectroscopy provided information regarding the formation-decay kinetics for the plasma active species, along with their densities and fluxes. The model-based analysis of the etching kinetics indicated that the non-monotonic etching rates were caused not by the similar behavior of the fluorine atom density but rather by the opposite changes of the fluorine atom flux and ion energy flux. It was also determined that the great decrease in both the Si and SiO2 etching rates during the transition from the CF4/Ar to C4F8/Ar gas system was due to the deposition of the fluorocarbon polymer film. PMID:26726514

  16. Optimization of time on CF4/O2 etchant for inductive couple plasma reactive ion etching of TiO2 thin film

    NASA Astrophysics Data System (ADS)

    Adzhri, R.; Arshad, M. K. Md.; Fathil, M. F. M.; Hashim, U.; Ruslinda, A. R.; Ayub, R. M.; Gopinath, Subash C. B.; Voon, C. H.; Foo, K. L.; M. Nuzaihan M., N.; Azman, A. H.; Zaki, M.

    2016-07-01

    In this work, we investigate the optimum etching of titanium dioxide (TiO2) using inductive couple plasma reactive ion etching (ICP-RIE) on our fabricated devices. By using a combination of CF4/O2 gases as plasma etchant with ratio of 3:1, three samples of TiO2 thin film were etched with different time duration of 10 s, 15 s and 20 s. The ion bombardment of CF4 gases with plasma enhancement by O2 gas able to break the oxide bond of TiO2 and allow anisotropic etch profile with maximum etch rate of 18.6 nm/s. The sample was characterized by using optical profilometer to determine the depth of etched area and scanning electron microscopy (SEM) for etch profile characterization.

  17. Etching of new phase change material Ti0.5Sb2Te3 by Cl2/Ar and CF4/Ar inductively coupled plasmas

    NASA Astrophysics Data System (ADS)

    Zhang, Zhonghua; Song, Sannian; Song, Zhitang; Cheng, Yan; Zhu, Min; Li, Xiaoyun; Zhu, Yueqin; Guo, Xiaohui; Yin, Weijun; Wu, Liangcai; Liu, Bo; Feng, Songlin; Zhou, Dong

    2014-08-01

    The etching characteristics of new phase change material Ti0.5Sb2Te3 (TST) were studied with the Cl2/Ar or CF4/Ar gas mixture using inductively coupled plasmas system. The effects of gas-mixing ratio, bias power, gas pressure, applying ICP power on the variations of etch rate, etch profiles, and surface roughness were investigated, respectively. Furthermore, X-ray photoelectron spectroscopy (XPS) compositional depth profiling was used to determine the surface degradation of etched TST using Cl2/Ar and CF4/Ar gas mixture. The etched TST shows a shift of the peaks related to Sb and Te to a higher energy for both etching gas, indicating the surface degradation of TST after etching. TST etched by Cl2 shows a thicker chloride layer remaining on the etched surface than fluorinate layer etched by CF4 owing to the higher reactivity. In the case of CF4, a thinner C-F polymer layer was observed on the etched surface, indicating lower etch rate due to the difficulty in making F diffusion into the TST through the C-F layer.

  18. Control of electron energy distributions and plasma characteristics of dual frequency, pulsed capacitively coupled plasmas sustained in Ar and Ar/CF4/O2

    NASA Astrophysics Data System (ADS)

    Song, Sang-Heon; Kushner, Mark J.

    2012-10-01

    The fluxes of radicals and ions to the wafer during plasma processing of microelectronics devices determine the quality of the etch or deposition. These fluxes are largely controlled by controlling the electron energy distribution function f(ɛ) which determines the dissociation patterns of feedstock gases. In quasi-steady state operation, an equilibrium condition for f(ɛ) results from a real time balance between electron sources and sinks. Using pulsed power, electron sources and sinks do not need to instantaneously balance—they only need to balance over the longer pulse period. This provides additional leverage to customize f(ɛ). In this paper, the f(ɛ) in a two-frequency, pulsed capacitively coupled plasma sustained in Ar and Ar/CF4/O2 mixtures are discussed with results from a two-dimensional plasma hydrodynamics model. The f(ɛ) are obtained from a Monte Carlo simulation which includes electron-electron collisions. We found that the f(ɛ) and rate coefficients can be controlled by pulse repetition frequency (PRF) and duty cycle (DC) of the pulsed power in a manner not otherwise easily attainable using continuous excitation. The tail of the f(ɛ) is enhanced with smaller PRF and DC in order to compensate for the electron losses during the power-off portion of the cycle.

  19. Two modes of capacitively coupled rf discharge in CF4

    NASA Astrophysics Data System (ADS)

    Proshina, O. V.; Rakhimova, T. V.; Rakhimov, A. T.; Voloshin, D. G.

    2010-12-01

    Capacitively coupled rf discharge in pure CF4 was studied using a one-dimensional self-consistent particle-in-cell Monte Carlo model. Two different discharge modes are observed depending on the discharge conditions: the regime of electronegative plasma with high-electron temperatures in the bulk, and the regime of electropositive plasma with abnormally low electron temperatures in the bulk. The characteristic features of the two discharge modes are considered. A sharp transition from the former to the latter mode is observed with an increase in applied voltage. The dependence of the transition voltage on gas pressure is analyzed. In the studied range of gas pressures, the existence of a high-temperature mode in an electronegative gas like CF4 is suggested by the balance between the ionization rate and attachment rate in the bulk region. As a result, the transition voltage increases with gas pressure because of the increased relative role of electron attachment. It is shown that the differences in the used electron cross-section sets may noticeably affect the simulation results and the discharge properties. Three different electron cross-section sets for CF4 are considered. In particular, the transition voltage between the two discharge modes differs essentially for different cross-sections used. In order to analyze the fundamental causes of this difference, a detailed comparison of three cross-section sets was done on the basis of the Monte Carlo calculation of swarm parameters in constant electric fields.

  20. Controlled MoS2 layer etching using CF4 plasma

    NASA Astrophysics Data System (ADS)

    Jeon, Min Hwan; Ahn, Chisung; Kim, HyeongU; Kim, Kyong Nam; Zhe LiN, Tai; Qin, Hongyi; Kim, Yeongseok; Lee, Sehan; Kim, Taesung; Yeom, Geun Young

    2015-09-01

    A few-layered molybdenum disulfide (MoS2) thin film grown by plasma enhanced chemical vapor deposition was etched using a CF4 inductively coupled plasma, and the possibility of controlling the MoS2 layer thickness to a monolayer of MoS2 over a large area substrate was investigated. In addition, damage and contamination of the remaining MoS2 layer surface after etching and a possible method for film recovery was also investigated. The results from Raman spectroscopy and atomic force microscopy showed that one monolayer of MoS2 was etched by exposure to a CF4 plasma for 20 s after an initial incubation time of 20 s, i.e., the number of MoS2 layers could be controlled by exposure to the CF4 plasma for a certain processing time. However, XPS data showed that exposure to CF4 plasma induced a certain amount of damage and contamination by fluorine of the remaining MoS2 surface. After exposure to a H2S plasma for more than 10 min, the damage and fluorine contamination of the etched MoS2 surface could be effectively removed.

  1. Effects of gas flow rate on the etch characteristics of a low- k sicoh film with an amorphous carbon mask in dual-frequency CF4/C4F8/Ar capacitively-coupled plasmas

    NASA Astrophysics Data System (ADS)

    Kwon, Bong-Soo; Lee, Hea-Lim; Lee, Nae-Eung; Kim, Chang-Young; Choi, Chi Kyu

    2013-01-01

    Highly selective nanoscale etching of a low-dielectric constant (low- k) organosilicate (SiCOH) layer using a mask pattern of chemical-vapor-deposited (CVD) amorphous carbon layer (ACL) was carried out in CF4/C4F8/Ar dual-frequency superimposed capacitively-coupled plasmas. The etching characteristics of the SiCOH layers, such as the etch rate, etch selectivity, critical dimension (CD), and line edge roughness (LER) during the plasma etching, were investigated by varying the C4F8 flow rate. The C4F8 gas flow rate primarily was found to control the degree of polymerization and to cause variations in the selectivity, CD and LER of the patterned SiCOH layer. Process windows for ultra-high etch selectivity of the SiCOH layer to the CVD ACL are formed due to the disproportionate degrees of polymerization on the SiCOH and the ACL surfaces.

  2. Study on Surface Modification of Indium Tin Oxide and Resist Surfaces Using CF4/O2 Plasma for Manufacturing Organic Light-Emitting Diodes by Inkjet Printing

    NASA Astrophysics Data System (ADS)

    Ikagawa, Masakuni; Tohno, Ichiro; Shinmura, Tadashi; Takagi, Shigeyuki; Kataoka, Yoshinori; Fujihira, Masamichi

    2008-12-01

    We studied a surface modification technique for indium tin oxide (ITO) anodes without precleaning and resist banks for manufacturing organic light-emitting diodes (OLEDs) by inkjet printing. The ITO surface modified by inductively coupled plasma (ICP) with an optimized CF4/O2 (7:3) gas mixture improved both its hydrophilicity and its work function, while the resist surface treated by the plasma became hydrophobic. The resist and ITO surfaces treated by plasmas of various gas mixtures (i.e., CF4, CF4/Ar (1:2), CF4/O2 (x:1; x=1, 7/3, 4, and 9) were analyzed by X-ray photoelectron spectroscopy (XPS) of the C 1s, F 1s, O 1s, and In 3d5/2 core levels. On the uncleaned ITO surfaces modified by CF4/O2 plasmas, organic contaminants were removed more efficiently and the deposition of CFx on the remaining contaminants decreased with increasing oxygen. The amount of F in the form of InFx increased using the CF4/O2 (7:3) plasma in comparison with that using the CF4/Ar and CF4 plasmas. We investigated the effect of adding oxygen to CF4 on the change in gaseous species produced in the plasma chamber by mass spectrometry. In the CF4/O2 (7:3) plasma, the peak intensities of F+, HF+, F2+, O+, and O2+ were higher than those in the CF4 plasma. The results suggest that In2O3 was generated by the oxidation of indium with O, and InFx was generated by the fluoridation of indium with HF. By introducing InFx onto ITO surfaces using the CF4/O2 plasma, the hole-injection energy barrier could be reduced.

  3. Li^+ attachment mass spectrometric investigation of high-mass neutral species in the downstream region of Ar/CF4, Ar/CF4/O2 and Ar/CF4/H2 plasmas

    NASA Astrophysics Data System (ADS)

    Furuya, Kenji; Okumura, Hiroshi; Tamai, Yuji; Ide, Akihiro; Harata, Akira

    2008-10-01

    Recently gaseous high-mass species have received significant attentions as important contributors to the nucleation of films and particulates in fluorocarbon plasmas. We have unambiguously identified the gaseous high-mass neutral species in the downstream region of the Ar/CF4 plasma [1], using the Li^+ attachment ionization technique that is a fragment-free ionization method. In this report, we show the results of mass analysis of high-mass neutral species in the Ar/CF4/O2 and Ar/CF4/H2 plasmas as well as Ar/CF4. In the Ar/CF4 plasma, we observed CnF2n+2 (n = 2-7) and CnF2n (n = 4-8) as neutral species. Adding O2 to the Ar/CF4 plasma resulted in the intensity decrease of CnF2n+2 and CnF2n, especially of those with relatively small n values. CnF2nO (n = 1-7) were newly observed in the Ar/CF4/O2 plasma. In contrast, adding H2 to the Ar/CF4 plasma resulted in the production of various new compounds, such as CnF2n-2 (n=3-8), CnF2n-4 (n=3-9), CnF2n+1H (n=1-7), CnF2n-1H (n=2-8), CnF2n-3H (n=4-9) and CnF2n-5H (n=5-9). These species are produced through the abstraction of F from various CnFm species by the H radical and the addition of H to them. [1] K. Furuya, S. Yukita, H. Okumura, A. Harata, Chem. Lett. 34, 224 (2005).

  4. Super-hydrophobicity and oleophobicity of silicone rubber modified by CF 4 radio frequency plasma

    NASA Astrophysics Data System (ADS)

    Gao, Song-Hua; Gao, Li-Hua; Zhou, Ke-Sheng

    2011-03-01

    Owing to excellent electric properties, silicone rubber (SIR) has been widely employed in outdoor insulator. For further improving its hydrophobicity and service life, the SIR samples are treated by CF 4 radio frequency (RF) capacitively coupled plasma. The hydrophobic and oleophobic properties are characterized by static contact angle method. The surface morphology of modified SIR is observed by atom force microscope (AFM). X-ray photoelectron spectroscopy (XPS) is used to test the variation of the functional groups on the SIR surface due to the treatment by CF 4 plasma. The results indicate that the static contact angle of SIR surface is improved from 100.7° to 150.2° via the CF 4 plasma modification, and the super-hydrophobic surface of modified SIR, which the corresponding static contact angle is 150.2°, appears at RF power of 200 W for a 5 min treatment time. It is found that the super-hydrophobic surface ascribes to the coaction of the increase of roughness created by the ablation action and the formation of [-SiF x(CH 3) 2- x-O-] n ( x = 1, 2) structure produced by F atoms replacement methyl groups reaction, more importantly, the formation of [-SiF 2-O-] n structure is the major factor for super-hydrophobic surface, and it is different from the previous studies, which proposed the fluorocarbon species such as C-F, C-F 2, C-F 3, CF-CF n, and C-CF n, were largely introduced to the polymer surface and responsible for the formation of low surface energy.

  5. Electron Cyclotron Resonance Based Chemically Assisted Plasma Etching Of Silicon in CF4/Ar Plasma

    SciTech Connect

    Bhardwaj, R.K.; Angra, S.K.; Bajpai, R.P.; Lal, Madan; Bharadwaj, Lalit M.

    2005-09-09

    Etching of silicon in Chemical Assisted Plasma Etching mode with CF4 gas being sprayed on the surface of wafer in process chamber and Ar fed to ECR cavity in Electron Cyclotron Resonance (ECR) source was carried out. The plasma source was 2.45 GHz microwave source superimposed with mirror type magnetic field configuration to have resonance. Effect of CF4/Ar ratio and substrate bias on etching rate of silicon and anisotropy of etched profile has been investigated. The variation of etch rate and anisotropy has been correlated to the availability of fluorine atoms and other radicals available for etching. Optimum parameters required for etching of silicon in chemical assisted plasma etching with self-assembled ECR plasma source has been established.

  6. Electron Cyclotron Resonance Based Chemically Assisted Plasma Etching Of Silicon in CF4/Ar Plasma

    NASA Astrophysics Data System (ADS)

    Bhardwaj, R. K.; Angra, S. K.; Bajpai, R. P.; Lal, Madan; Bharadwaj, Lalit M.

    2005-09-01

    Etching of silicon in Chemical Assisted Plasma Etching mode with CF4 gas being sprayed on the surface of wafer in process chamber and Ar fed to ECR cavity in Electron Cyclotron Resonance (ECR) source was carried out. The plasma source was 2.45 GHz microwave source superimposed with mirror type magnetic field configuration to have resonance. Effect of CF4/Ar ratio and substrate bias on etching rate of silicon and anisotropy of etched profile has been investigated. The variation of etch rate and anisotropy has been correlated to the availability of fluorine atoms and other radicals available for etching. Optimum parameters required for etching of silicon in chemical assisted plasma etching with self-assembled ECR plasma source has been established.

  7. Vacuum ultra-violet emission of CF4 and CF3I containing plasmas and Their effect on low-k materials

    NASA Astrophysics Data System (ADS)

    el Otell, Z.; Šamara, V.; Zotovich, A.; Hansen, T.; de Marneffe, J.-F.; Baklanov, M. R.

    2015-10-01

    CF3I was suggested as a replacement of CF4 gas to decrease the plasma-induced damage (PID) on low-k dielectrics during etching. This proposal is investigated by means of plasma emission measurements and material characterisation. The experiments were conducted in a 300 mm capacitively coupled plasma source. The vacuum ultraviolet (VUV, 30≤slant λ ≤slant 220 nm) plasma emission was measured for discharges generated in a pure or a mixture of argon, CF4 and/or CF3I, since VUV plays a major role in PID. However, CF3I containing discharges were found to have a stronger emission than CF4 in the VUV range. Nevertheless, Fourier transform infra-red spectroscopy and κ-value measurements showed that there is almost no difference between the damage caused by CF3I or CF4 containing plasmas, while etching in a capacitively coupled plasma source. It is proposed that the damage caused by CF3I with lower F*-density but higher VUV-photon flux is similar to the damage caused by CF4, with higher F*-density but lower VUV-photon flux.

  8. Comparison of CF4, CHF3 and CH2F2 plasmas used for wafer processing

    NASA Astrophysics Data System (ADS)

    Tinck, Stefan; Milenin, Alexey; Bogaerts, Annemie

    2012-10-01

    Fluorocarbon-based plasmas are widely used in the microelectronics industry for the fabrication of computer chips, i.e. in plasma etching of silicon. One such process is the etching of nanoscale trenches in the Si substrate with CHxFy plasmas as applied in shallow trench isolation (STI). By carefully altering the ratio between gases such as CF4, CHF3 and CH2F2, the overall etching process can be controlled in terms of chemical etching, sputtering and sidewall passivation. Therefore, we wish to obtain a more fundamental understanding of these plasmas and their surface processes. The plasma behavior will be simulated by a hybrid model for addressing the various plasma species, while the surface interactions of the plasma will be described by additional Monte Carlo simulations, allowing a detailed insight in the nanoscale trench etching process. Bulk plasma properties such as species densities, temperatures and fluxes towards the walls will be discussed under typical wafer processing conditions as well as surface properties including etch rate and chemical composition of the surface during trench etching. The etch rate and microscopic etch profiles will be compared with experimental data.

  9. Surface modification of a polyamide 6 film by He/CF 4 plasma using atmospheric pressure plasma jet

    NASA Astrophysics Data System (ADS)

    Gao, Zhiqiang; Sun, Jie; Peng, Shujing; Yao, Lan; Qiu, Yiping

    2009-12-01

    Polyamide 6 (PA 6) films are treated with helium(He)/CF 4 plasma at atmospheric pressure. The samples are treated at different treatment times. The surface modification of the PA 6 films is evaluated by water contact angle, atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). The etching rate is used to study the etching effect of He/CF 4 plasma on the PA 6 films. The T-peel strengths of the control and plasma treated films are measured to show the surface adhesion properties of the films. As the treatment time increases, the etching rate decreases steadily, the contact angle decreases initially and then increases, while the T-peel strength increases first and then decreases. AFM analyses show that the surface roughness increases after the plasma treatment. XPS analyses reveal substantial incorporation of fluorine and/or oxygen atoms to the polymer chains on the film surfaces.

  10. Optimization of a RF-generated CF4/O2 gas plasma sterilization process.

    PubMed

    Lassen, Klaus S; Nordby, Bolette; Grün, Reinar

    2003-05-15

    A sterilization process with the use of RF-generated (13.56 MHz) CF(4)/O(2) gas plasma was optimized in regards to power, flow rate, exposure time, and RF-system type. The dependency of the sporicidal effect on the spore inoculum positioning in the chamber of the RF systems was also investigated. Dried Bacillus stearothermophilus ATCC 7953 endospores were used as test organisms. The treatments were evaluated on the basis of survival curves and corresponding D values. The only parameter found to affect the sterilization process was the power of the RF system. Higher power resulted in higher kill. Finally, when the samples were placed more than 3-8 cm away from a centrally placed electrode in System 2, the sporicidal effect was reduced. The results are discussed and compared to results from the present literature. The RF excitation source is evaluated to be more appropriate for sterilization processes than the MW source. PMID:12687716

  11. Numerical simulation of evolution features of the atmospheric-pressure CF4 plasma generated by the pulsed dielectric barrier discharge

    NASA Astrophysics Data System (ADS)

    Pan, Jie; Li, Li; Chen, Bo; Song, Yuzhi; Zhao, Yuefeng; Xiu, Xianwu

    2016-06-01

    The atmospheric-pressure CF4 plasma has the high application potential in the field of semiconductor fabrication since it can combine the excellent capability for the CF4 plasma etching with the easy atmospheric-pressure operation. In this work, the fluid model has been carried out to numerically research evolution features of the atmospheric-pressure CF4 plasma generated by the pulsed dielectric barrier discharge. The computational results show that the averaged electron temperature dramatically increases during the rising and the falling phases of the applied voltage pulse, and then swiftly decreases. The discharge current density has the waveform of two bipolar short pulses. The electrons and CF3 + ions form the cathode sheath at the discharge duration. However, the CF3 - and F- negative ions take the place of the electrons to sustain the cathode sheath of the CF4 discharge plasma at the time interval between the two bipolar discharge pulses. During the time interval of the two adjacent applied voltage pulses the discharge region is the quasi-neutral plasma region, and meanwhile CF2 + and CF3 - are the dominated charged species. Moreover, F and CF3 maintain the relatively stable high densities and uniform axial distributions during the whole period of the applied voltage.

  12. Heterogeneous processes in CF4/O2 plasmas probed using laser-induced fluorescence of CF2

    NASA Astrophysics Data System (ADS)

    Hansen, S. G.; Luckman, G.; Nieman, George C.; Colson, Steven D.

    1990-09-01

    Laser-induced fluorescence of CF2 is used to monitor heterogeneous processes in ≊300 mTorr CF4/O2 plasmas. CF2 is rapidly removed at fluorinated copper and silver surfaces in 13.56-MHz rf discharges as judged by a distinct dip in its spatial distribution. These metals, when employed as etch masks, are known to accelerate plasma etching of silicon, and the present results suggest catalytic dehalogenation of CF2 is involved in this process. In contrast, aluminum and silicon dioxide exhibit negligible reactivity with CF2, which suggests that aluminum masks will not appreciably accelerate silicon etching and that ground state CF2 does not efficiently etch silicon dioxide. Measurement of CF2 decay in a pulsed discharge coupled with direct laser sputtering of metal into the gas phase indicates the interaction between CF2 and the active metals is purely heterogeneous. Aluminum does, however, exhibit homogeneous reactivity with CF2. Redistribution of active metal by plasma sputtering readily occurs; silicon etch rates may also be enhanced by the metal's presence on the silicon surface. Polymers contribute CF2 to the plasma as they etch. The observation of an induction period suggests fluorination of the polymer surface is the first step in its degradation. Polymeric etch masks can therefore depress the silicon etch rate by removal of F atoms, the primary etchants.

  13. Hydrophobization of polymer particles by tetrafluoromethane (CF4) plasma irradiation using a barrel-plasma-treatment system

    NASA Astrophysics Data System (ADS)

    Matsubara, Keisuke; Danno, Masato; Inoue, Mitsuhiro; Nishizawa, Hideki; Honda, Yuji; Abe, Takayuki

    2013-11-01

    In this study, tetrafluoromethane (CF4) plasma-treatments of polymethylmethacrylate (PMMA) powder were performed using a polygonal barrel-plasma-treatment system to improve the PMMA's hydrophobicity. Characterization of the treated samples showed that the PMMA particle surfaces were fluorinated by the CF4 treatment. The smooth surfaces of the particles changed into nano-sized worm-like structures after the plasma-treatment. The hydrophobicity of the treated PMMA samples was superior to that of the untreated samples. It was noted that the hydrophobicity of the treated samples and the surface fluorination level depended on the plasma-treatment time and radiofrequency (RF) power; high RF power increased the sample temperature, which in turn decreased the hydrophobicity of the treated samples and the surface fluorination because of the thermal decomposition of PMMA. The water-repellent effects were evaluated by using paper towels to show the application of the plasma-treated PMMA particles, with the result that the paper towel coated with the treated sample was highly water-repellent.

  14. ICP Reactor Modeling: CF4 Discharge

    NASA Technical Reports Server (NTRS)

    Bose, Deepak; Govindan, T. R.; Meyyappan, M.

    1999-01-01

    Inductively coupled plasma (ICP) reactors are widely used now for etching and deposition applications due to their simpler design compared to other high density sources. Plasma reactor modeling has been playing an important role since it can, in principle, reduce the number of trial and error iterations in the design process and provide valuable understanding of mechanisms. Fluorocarbon precursors have been the choice for oxide etching. We have data available on CF4 from our laboratory. These are current voltage characteristics, La.ngmuir probe data, UV-absorption, and mass spectrometry measurements in a GEC-ICP reactor. We have developed a comprehensive model for ICP reactors which couples plasma generation and transport and neutral species dynamics with the gas flow equations. The model has been verified by comparison with experimental results for a nitrogen discharge in an ICP reactor. In the present work, the model has been applied to CF4 discharge and compared to available experimental data.

  15. Abatement of CF4 by atmospheric-pressure microwave plasma torch

    NASA Astrophysics Data System (ADS)

    Hong, Yong C.; Uhm, Han S.

    2003-08-01

    An atmospheric microwave plasma torch is presented for post-pump destruction of perfluorocompound gases (PFCs), which are used widely in the semiconductor industry and are emitted with nitrogen gas for vacuum pump purges. Discharges of the microwave plasma torch are well suited for abatement of PFC contaminants discharged at a typical flow rate. The abatement was carried out using oxygen or air as additive gases. Analytical results are systematically compared to quadrupole mass spectroscopy and Fourier transform infrared (FTIR) data in the laboratory. Destruction and removal efficiency of more than 99% in FTIR data was achieved for carbon tetrafluoride.

  16. Degree of functionalization and stability of fluorine groups fixed to carbon nanotubes and graphite nanoplates by CF4 microwave plasma

    NASA Astrophysics Data System (ADS)

    Abdelkader-Fernández, V. K.; Morales-Lara, F.; Melguizo, M.; García-Gallarín, C.; López-Garzón, R.; Godino-Salido, M. L.; López-Garzón, F. J.; Domingo-García, M.; Pérez-Mendoza, M. J.

    2015-12-01

    The fluorination of graphite nanoplates (GNPs) and multi-wall carbon nanotubes (MWCNTs) by CF4 cold plasma is reported. The aim is to analyze the influence of the textural characteristics in the degree of fluorination and in the thermal stability of the fluorine groups. We have used thermal programmed desorption which clearly discriminates the nature of the desorbing species and their stability. The degree of fluorination of both materials is similar up to 20 min of treatment and then it decreases in GNPs at longer treatments. Nevertheless, the fluorine content in MWCNTs keeps increasing after 45 min. This different evolution of the fluorination degree with the time is related to the surface areas. The fluorine bonding is produced not only in defects and irregularities but also on the external graphene sheets of both materials, and it results in up to eight different chemical environments having different thermal stabilities from 150 °C up to temperatures higher than 900 °C. The fluorination increases the electronic states near the Fermi level of the nanotubes whereas it does not affect the electronic properties of graphite nanoplates. It is shown that no intercalation compounds are formed and that the textural characteristics of the materials remain unchanged after fluorination.

  17. On the etching characteristics and mechanisms of HfO2 thin films in CF4/O2/Ar and CHF3/O2/Ar plasma for nano-devices.

    PubMed

    Lim, Nomin; Efremov, Alexander; Yeom, Geun Young; Kwon, Kwang-Ho

    2014-12-01

    The study of etching characteristics and mechanisms for HfO2 and Si in CF4/O2/Ar and CHF3/O2/Ar inductively-coupled plasmas was carried out. The etching rates of HfO2 thin films as well as the HfO2/Si etching selectivities were measured as functions of Ar content in a feed gas (0-50% Ar) at fixed fluorocarbon gas content (50%), gas pressure (6 mTorr), input power (700 W), bias power (200 W), and total gas flow rate (40 sccm). Plasma parameters as well as the differences in plasma chemistries for CF4- and CHF3-based plasmas were analyzed using Langmuir probe diagnostics and 0-dimensional plasma modeling. It was found that, in both gas systems, the non-monotonic (with a maximum at about 15-20% Ar) HfO2 etching rate does not correlate with monotonic changes of F atom flux and ion energy flux. It was proposed that, under the given set of experimental conditions, the HfO2 etching process is affected by the factors determining the formation and decomposition kinetics of the fluorocarbon polymer layer. These factor are the fluxes of CF(x) (x = 1, 2) radicals, O atoms and H atoms. PMID:25971118

  18. Computational study of the CF4 /CHF3 / H2 /Cl2 /O2 /HBr gas phase plasma chemistry

    NASA Astrophysics Data System (ADS)

    Tinck, Stefan; Bogaerts, Annemie

    2016-05-01

    A modelling study is performed of high-density low-pressure inductively coupled CF4/CHF3/H2/Cl2/O2/HBr plasmas under different gas mixing ratios. A reaction set describing the complete plasma chemistry is presented and discussed. The gas fraction of each component in this mixture is varied to investigate the sensitivity of the plasma properties, like electron density, plasma potential and species densities, towards the gas mixing ratios. This research is of great interest for microelectronics applications because these gases are often combined in two (or more)-component mixtures, and mixing gases or changing the fraction of a gas can sometimes yield unwanted reaction products or unexpected changes in the overall plasma properties due to the increased chemical complexity of the system. Increasing the CF4 fraction produces more F atoms for chemical etching as expected, but also more prominently lowers the density of Cl atoms, resulting in an actual drop in the etch rate under certain conditions. Furthermore, CF4 decreases the free electron density when mixed with Cl2. However, depending on the other gas components, CF4 gas can also sometimes enhance free electron density. This is the case when HBr is added to the mixture. The addition of H2 to the gas mixture will lower the sputtering process, not only due to the lower overall positive ion density at higher H2 fractions, but also because more H+, \\text{H}2+ and \\text{H}3+ are present and they have very low sputter yields. In contrast, a larger Cl2 fraction results in more chemical etching but also in less physical sputtering due to a smaller abundance of positive ions. Increasing the O2 fraction in the plasma will always lower the etch rate due to more oxidation of the wafer surface and due to a lower plasma density. However, it is also observed that the density of F atoms can actually increase with rising O2 gas fraction. This is relevant to note because the exact balance between fluorination and oxidation is

  19. Irradiation of poly(tetrafluoroethylene) surfaces by CF4 plasma to achieve robust superhydrophobic and enhanced oleophilic properties for biological applications.

    PubMed

    Salapare, Hernando S; Suarez, Beverly Anne T; Cosiñero, Hannah Shamina O; Bacaoco, Miguel Y; Ramos, Henry J

    2015-01-01

    Poly(tetrafluoroethylene) (PTFE) was irradiated by CF4 plasma produced in the gas discharge ion source facility to produce stable and robust superhydrophobic surfaces and to enhance the materials' oleophilic property for biological applications. The characterizations employed on the samples are contact angle measurements, analysis of the surface morphology (scanning electron microscopy), surface roughness measurements (atomic force microscopy) and analysis of the surface chemistry (Fourier transform infrared spectroscopy). Superhydrophobic behavior with water contact angles as high as 156° was observed. The wettability of all the treated samples was found to be stable in time as evidenced by the statistically insignificant differences in the hysteresis contact angles. The level of enhanced hydrophobicity depended on the plasma energies (i.e. irradiation times, discharge current, and discharge voltage); higher plasma energies produced surfaces with high hydrophobicity. The plasma treatment also enhanced the oleophilic property of the materials' surface as evidenced by the decrease in the PDMS-oil contact angle from 33° to as low as 10°. The superhydrophobicity of the modified PTFE and the enhancement of its oleophilic property were due to (1) the changes in the roughness of the surface, (2) the formation of nanoparticles or nanostructures on the surface, and (3) the changes in the surface chemistry. PMID:25491987

  20. Comparison of CF4 and SF6 based plasmas for ECR etching of isotopically enriched 10Boron films

    SciTech Connect

    Voss, L F; Reinhardt, C E; Graff, R T; Conway, A M; Nikolic, R J; Deo, N; Cheung, C L

    2009-02-23

    Isotopically enriched {sup 10}boron films have been successfully etched in an ECR etching tool using CF{sub 4} and SF{sub 6} based plasmas. Comparisons between the two are made with regards to etch rate, selectivity to the underlying Si device structure, and morphology of the {sup 10}boron post-etching. The present film etching development is expected to be critical for the fabrication of next generation thermal neutron solid state detectors based on {sup 10}boron.

  1. [The spectra of a laser-produced plasma source with CO2, O2 and CF4 liquid aerosol spray target].

    PubMed

    Ni, Qi-Liang; Chen, Bo

    2008-11-01

    A laser-produced plasma (LPP) source with liquid aerosol spray target and nanosecond laser was developed, based on both soft X-ray radiation metrology and extreme ultraviolet projection lithography (EUVL). The LPP source is composed of a stainless steel solenoid valve whose temperature can be continuously controlled, a Nd : YAG laser with pulse width, working wavelength and pulse energy being 7 ns, 1.064 microm and 1J respectively, and a pulse generator which can synchronously control the valve and the laser. A standard General Valve Corporation series 99 stainless steel solenoid valve with copper gasket seals and a Kel-F poppet are used in order to minimize leakage and poppet deformation during high-pressure cryogenic operation. A close fitting copper cooling jacket surrounds the valve body. The jacket clamps a copper coolant carrying tube 3 mm in diameter, which is fed by an automatically pressurized liquid nitrogen-filled dewar. The valve temperature can be controlled between 77 and 473 K. For sufficiently high backing pressure and low temperature, the valve reservoir gas can undergo a gas-to-liquid phase transition. Upon valve pulsing, the liquid is ejected into a vacuum and breaks up into droplets, which is called liquid aerosol spray target. For the above-mentioned LPP source, firstly, by the use of Cowan program on the basis of non-relativistic quantum mechanics, the authors computed the radiative transition wavelengths and probabilities in soft X-ray region for O4+, O5+, O6+, O7+, F5+, F6+ and F7+ ions which were correspondingly produced from the interaction of the 10(11)-10(12) W x cm(-2) power laser with liquid O2, CO2 and CF4 aerosol spray targets. Secondly, the authors measured the spectra of liquid O2, CO2 and CF4 aerosol spray target LPP sources in the 6-20 nm band for the 8 x 10(11) W x cm(-2) laser irradiance. The measured results were compared with the Cowan calculated results ones, and the radiative transition wavelength and probability for the

  2. Modeling The CF4 Laser

    NASA Astrophysics Data System (ADS)

    Patterson, C. W.; McDowell, R. S.; Krohn, B. J.; Nereson, N. G.

    1981-12-01

    The CO2-pumped CF4 laser is a potentially useful source of line-tunable infrared radiation in the region 605-655 cm 1, and the spectroscopy of CF4 has been carried to the point that the laser frequencies that will result from any given pump line can be calculated to better than 0.01 cm 1. We now report quantitative intensity and line-broadening studies on CF4 and their application to modeling the laser gain. First, absorption measurements on isolated lines in the ν2 + ν4 pump band at a series of pressures yield an effective transition dipole moment for this band of 0.010 Debye. At the same time the transition moment for the (ν2 + ν4) - ν2 laser band has been calculated and agrees well with the results of laser self-absorption measurements. Finally, linewidths determined as a function of pressure yield a pressure-broadening coefficient of ca. 10 MHz/torr, significantly greater than that expected from a hard-sphere gas-kinetic model. From these data the gain of the CF4 laser can be calculated at various pressures and temperatures; the results are in reasonable agreement with measured values.

  3. Modeling the CF4 laser

    NASA Astrophysics Data System (ADS)

    Patterson, C. W.; McDowell, R. S.; Krohn, B. J.; Nereson, N. G.

    Quantitative intensity and line broadening studies on CF4 and their application to modeling the laser gain is presented. First, absorption measurements on isolated lines in the v sub 2 + v sub 4 pump band at a series of pressures yield an effective transition dipole moment for this band of 0.010 Debye. At the same time the transition moment for the v sub 2 + v sub 4 - v sub 2 laser band are calculated and agrees well with the results of laser self-absorption measurements. Finally, linewidths determined as a function of pressure yield a pressure broadening coefficient of ca, 10 MHz/torr, significantly greater than that expected from a hard sphere gas kinetic model. From these data the gain of the CF4 laser are calculated at various pressures and temperatures; the results are in reasonable agreement with measured values.

  4. Dry etching of beta-SiC in CF4 and CF4 + O2 mixtures

    NASA Technical Reports Server (NTRS)

    Palmour, J. W.; Davis, R. F.; Wallett, T. M.; Bhasin, K. B.

    1986-01-01

    Dry etching of cubic (100) beta-SiC single-crystal thin films produced via chemical-vapor deposition (CVD) has been performed in CF4 and CF4 + O2 mixtures, in both the reactive-ion-etching (RIE) and plasma-etching modes. The latter process yielded measurable etch rates, but produced a dark surface layer which appears, from the results of secondary-ion mass spectrometry, to be residual SiC. The RIE samples had no residual layer, but Auger electron spectroscopy did reveal a C-rich surface. The optimal RIE conditions were obtained with 10 sccm of pure CF4 at 40 mtorr and a power density of 0.548 W/sq cm, giving an etch rate of 23.3 nm/min. Neither the increase of temperature between 293 and 573 K, nor the incremental addition of O2 to CF4 to 50 percent, produced any strong effect on the etch rates of SiC during RIE. Pictorial evidence of fine line structures produced by RIE of beta-SiC films are also presented.

  5. Reactive ion etching of Si(x)Sb2Te in CF4/Ar plasma for nonvolatile phase-change memory device.

    PubMed

    Gu, Yifeng; Song, Sannian; Song, Zhitang; Cheng, Yan; Liu, Xuyan; Du, Xiaofeng; Liu, Bo; Feng, Songlin

    2013-02-01

    Si(x)Sb2Te material system is novel for phase-change random access memory applications. Its properties are more outstanding than the widely used material Ge2Sb2Te5. Etching process is one of the critical steps in the device fabrication. The etching characteristics of phase-change material Si(x)Sb2Te were studied with CF4/Ar gas mixture by a reactive ion etching system. The changes of etching rate, etching profile and surface root-mean-square roughness resulted from variation of the gas-mixing ratio were investigated under constant pressure (50 mTorr) and applying power (200 W). Si0.34Sb2Te is with the highest phase-change speed and the lowest power consumption in the PCRAM memory among these compositions, which means it is the most promising candidate for the PCRAM applications. So the most optimized CF4/Ar gas ratio for Si0.34Sb2Te was studied, the value is 25/25. The etching rate is 155 nm/min, and the selectivity of Si0.34Sb2Te to SiO2 is as high as 3.4 times. Furthermore, the smooth surface was achieved with this optimized gas ratio. PMID:23646688

  6. A high level computational study of the CH4/CF4 dimer: how does it compare with the CH4/CH4 and CF4/CF4 dimers?

    NASA Astrophysics Data System (ADS)

    Biller, Matthew J.; Mecozzi, Sandro

    2012-04-01

    The interaction within the methane-methane (CH4/CH4), perfluoromethane-perfluoromethane (CF4/CF4) methane-perfluoromethane dimers (CH4/CF4) was calculated using the Hartree-Fock (HF) method, multiple orders of Møller-Plesset perturbation theory [MP2, MP3, MP4(DQ), MP4(SDQ), MP4(SDTQ)], and coupled cluster theory [CCSD, CCSD(T)], as well as the PW91, B97D, and M06-2X density functional theory (DFT) functionals. The basis sets of Dunning and coworkers (aug-cc-pVxZ, x = D, T, Q), Krishnan and coworkers [6-311++G(d,p), 6-311++G(2d,2p)], and Tsuzuki and coworkers [aug(df, pd)-6-311G(d,p)] were used. Basis set superposition error (BSSE) was corrected via the counterpoise method in all cases. Interaction energies obtained with the MP2 method do not fit with the experimental finding that the methane-perfluoromethane system phase separates at 94.5 K. It was not until the CCSD(T) method was considered that the interaction energy of the methane-perfluoromethane dimer (-0.69 kcal mol-1) was found to be intermediate between the methane (-0.51 kcal mol-1) and perfluoromethane (-0.78 kcal mol-1) dimers. This suggests that a perfluoromethane molecule interacts preferentially with another perfluoromethane (by about 0.09 kcal mol-1) than with a methane molecule. At temperatures much lower than the CH4/CF4 critical solution temperature of 94.5 K, this energy difference becomes significant and leads perfluoromethane molecules to associate with themselves, forming a phase separation. The DFT functionals yielded erratic results for the three dimers. Further development of DFT is needed in order to model dispersion interactions in hydrocarbon/perfluorocarbon systems.

  7. Spectroscopy Of The CF4 Laser

    NASA Astrophysics Data System (ADS)

    McDowell, R. S.; Patterson, C. W.; Jones, C. R.; Buchwald, M. I.; Telle, J. M.

    1980-11-01

    When v2+v4 of CF4 at 1066 cm-1 is pumped by the 9.4-µm CO2 laser, stimulated emission on the (v2+v4) + v2 transition produces many discrete laser lines in the region 605 to 655 cm-1. A comprehensive program of Doppler-limited absorption spectroscopy of CF4 has been carried out using tunable semiconductor diode lasers, and has led to a full understanding of the rovibrational energy levels involved in the laser process. The frequencies of 28 laser lines of 12CF4 have been measured with an accuracy of ±0.2 cm- 1, for 12C16O2 pump lines from P(14) to R(24). From the complete vibration-rotation analysis of the v2+v4 band, the pump and laser transitions have been identified. Using the spectroscopic constants determined in the band analyses, we can predict within ±0.2 cm-1 the laser lines to be expected from any given pumping frequency. All observed laser lines have been accounted for; in a few cases there is evidence for a relaxation of J-value and/or Coriolis sublevel in the upper state. Application of these results to improving the performance of the CF4 laser and for designing it to produce specific desired output frequencies is discussed.

  8. A CF4 based positron trap

    NASA Astrophysics Data System (ADS)

    Marjanovic, Srdjan; Bankovic, Ana; Dujko, Sasa; Deller, Adam; Cooper, Ben; Cassidy, David; Petrovic, Zoran

    2016-05-01

    All positron buffer gas traps in use rely on N2 as the primary trapping gas due to its conveniently placed a1 Π electronic excitation cross section that is large enough to compete with positronium (Ps) formation in the threshold region. Its energy loss of 8.5 eV is sufficient to capture positrons into a potential well upon a single collision. The competing Ps formation, however, limits the efficiency of the two stage trap to 25 %. As positron moderators produce beams with energies of several eV we have proposed to use CF4 in the first stage of the trap, due to its large vibrational excitation cross section, where several vibrational excitations would be sufficient to trap the positrons with small losses. Apart from the simulations we also report the results of attempts to apply this approach to an existing Surko-type positron trap. Operating the unmodified trap as a CF4 based device proved to be unsuccessful, due primarily to excessive scattering due to high CF4 pressure in the first stage. However, the performance was consistent with subsequent simulations using the real system parameters. This agreement indicates that an efficient CF4 based scheme may be realized in an appropriately designed trap. also at Serbian Academy of Sciences and Arts, Knez Mihajlova 35, 11000 Belgrade, Serbia.

  9. Impact of Gas Heating in Inductively Coupled Plasmas

    NASA Technical Reports Server (NTRS)

    Hash, D. B.; Bose, D.; Rao, M. V. V. S.; Cruden, B. A.; Meyyappan, M.; Sharma, S. P.; Biegel, Bryan (Technical Monitor)

    2001-01-01

    Recently it has been recognized that the neutral gas in inductively coupled plasma reactors heats up significantly during processing. The resulting gas density variations across the reactor affect reaction rates, radical densities, plasma characteristics, and uniformity within the reactor. A self-consistent model that couples the plasma generation and transport to the gas flow and heating has been developed and used to study CF4 discharges. A Langmuir probe has been used to measure radial profiles of electron density and temperature. The model predictions agree well with the experimental results. As a result of these comparisons along with the poorer performance of the model without the gas-plasma coupling, the importance of gas heating in plasma processing has been verified.

  10. Fourier Transform Infrared Spectroscopy of CF4 on the GEC Reference Cell

    NASA Technical Reports Server (NTRS)

    Rao, M. V. V. S.; Sharma, S. P.; Meyyappan, M.; Cruden, Brett A.; Arnold, Jim (Technical Monitor)

    2001-01-01

    Fourier Transform Infrared Spectroscopy (FTIR) has been used to characterize inductively coupled CF4 plasmas in a GEC Reference Cell in-situ In examining these FTIR spectra, several assumptions and approximations of FTIR analysis are addressed. This includes the density dependence of cross-sections, non-linear effects in the addition of overlapping bands and the effect of spatial variations in density and temperature, This analysis demonstrates that temperatures extracted from MR spectra may provide a poor estimate of the true neutral plasma temperature. The FTIR spectra are dominated by unreacted CF, accounting for 40-60% of the gas products. The amount of CF4 consumption is found to have a marked dependence on power, and is nearly independent of pressure in the range of 10-50 mtorr. Small amounts of C2F6 are observed at low power. Also observed are etching products from the quartz window SiF4 COF2 and CO which occur in approximately equal ratios and together account for less than 10% of the gas. The concentrations of these species are nearly independent of pressure. CFx radicals are below the detection limit of this apparatus (approx. 1012/cc).

  11. Photoionisation study of Xe.CF4 and Kr.CF4 van-der-Waals molecules

    NASA Astrophysics Data System (ADS)

    Alekseev, V. A.; Garcia, G. A.; Kevorkyants, R.; Nahon, L.

    2016-05-01

    We report on photoionization studies of Xe.CF4 and Kr.CF4 van-der-Waals complexes produced in a supersonic expansion and detected using synchrotron radiation and photoelectron-photoion coincidence techniques. The ionization potential of CF4 is larger than those of the Xe and Kr atoms and the ground state of the Rg.CF4+ ion correlates with Rg+ (2P3/2) + CF4. The onset of the Rg.CF4+ signals was found to be only ˜0.2 eV below the Rg ionization potential. In agreement with experiment, complementary ab initio calculations show that vertical transitions originating from the potential minimum of the ground state of Rg.CF4 terminate at a part of the potential energy surfaces of Rg.CF4+, which are approximately 0.05 eV below the Rg+ (2P3/2) + CF4 dissociation limit. In contrast to the neutral complexes, which are most stable in the face geometry, for the Rg.CF4+ ions, the calculations show that the minimum of the potential energy surface is in the vertex geometry. Experiments which have been performed only with Xe.CF4 revealed no Xe.CF4+ signal above the first ionization threshold of Xe, suggesting that the Rg.CF4+ ions are not stable above the first dissociation limit.

  12. Solution and displacement in monolayer and multilayer binary films of SF6 and CF4 on graphite.

    PubMed

    Thomas, Petros; Grogan, Michael D W; Hess, George B

    2015-09-21

    Infrared reflection absorption spectroscopy is used to study the evolution of binary physisorbed films on graphite. A predeposited monolayer of SF6 is exposed to slowly increasing pressure of CF4 at constant temperature between 80 and 113 K. Shifts in the frequencies of the dominant vibrational mode of each species due to resonant dipole-dipole coupling serve as proxies for the areal density of each species in the monolayer. If the initial SF6 film is far below saturation (coexistence with bulk solid), the SF6 can be largely displaced by continuous solution of CF4. However, if the initial SF6 layer is at or near saturation, a layer of CF4 condenses on top at a well defined CF4 pressure after only 2%-3% dilution of the SF6 layer. Simultaneously, most of the dissolved CF4 is withdrawn from the SF6 layer. With further increase in CF4 pressure, the CF4 layer is compressed and additional layers condense, while the SF6 layer is again diluted. Still, the SF6 layer retains about 90% concentration until the CF4 pressure is very close to saturation, at which point the SF6 is rapidly displaced, apparently going into dilute solution in the rapidly growing CF4 multilayer. Monte Carlo simulations are used to quantitatively relate measured frequency shifts to concentrations in the binary monolayer. PMID:26395723

  13. CF4 Adsorption on Open Carbon Nanohorns

    NASA Astrophysics Data System (ADS)

    Khanal, Pravin; Russell, Brice; Migone, Aldo; Iijima, Sumio; Yudasaka, Masako

    We have measured adsorption isotherms at ten different temperatures between 90.4 K and 163.8 K for CF4 on a sample of chemically-opened carbon nanohorns. The interior of the individual nanohorns is accessible to sorbates in these chemically-opened nanohorns. Two substeps are visible in the adsorption data, one corresponding to groups of stronger binding sites (lower pressure substep) and another corresponding to weaker binding sites (higher pressure substep). The stronger binding sites are interstitial pore-like spaces within the nanohorn aggregates and intra-nanohorns pores while the weaker binding sites are the outer surfaces of the individual and interior sites located away from the tips of the nanohorns. Results for the effective specific surface area, the kinetics of adsorption, and the isosteric heat of adsorption as a function of sorbent loading will be presented and compared to adsorption results with other sorbates on open carbon nanohorns. This work was supported by the NSF through Grant DMR-1006428.

  14. Cooking strongly coupled plasmas

    NASA Astrophysics Data System (ADS)

    Clérouin, Jean

    2015-09-01

    We present the orbital-free method for dense plasmas which allows for efficient variable ionisation molecular dynamics. This approach is a literal application of density functional theory where the use of orbitals is bypassed by a semi-classical estimation of the electron kinetic energy through the Thomas-Fermi theory. Thanks to a coherent definition of ionisation, we evidence a particular regime in which the static structure no longer depends on the temperature: the Γ-plateau. With the help of the well-known Thomas-Fermi scaling laws, we derive the conditions required to obtain a plasma at a given value of the coupling parameter and deduce useful fits. Static and dynamical properties are predicted as well as a a simple equation of state valid on the Γ-plateau. We show that the one component plasma model can be helpful to describe the correlations in real systems.

  15. Patterning of SU-8 resist structures using CF4

    NASA Astrophysics Data System (ADS)

    Vora, Kaushal D.; Holland, Anthony S.; Ghantasala, Muralidhar K.; Mitchell, Arnan

    2004-04-01

    Carbon Tetraflouride (CF4) plasma etching condition for SU-8 negative photoresist is characterized for its potential applications in photonics and bioMEMS. The effects of main plasma etching parameters such as rf power, gas flow rate, chamber pressure and time were systematically studied and the parameters were optimized by a three-level, L9 orthogonal array of the Taguchi method. By optimization, the optimal parameter range and the weighted percent of each parameter on the final results i.e. depth, surface roughness and wall angle were determined. Photoresist & metal were used and compared as masks for plasma etching. The minimum feature size was 1μm in both cases. Results indicated that with the increase of rf power, etch rate and roughness increases almost linearly. With increase in gas flow rate, etch rate increases while roughness decreases non-linearly. Etch rate is linear with time but roughness is significantly dependent on time initially. The side-wall angle of the samples with metal mask was found to be nearly 90° whereas samples with photoresist as the mask showed poor side-wall angle and surface roughness mainly due to poor mask-resist selectivity. Optimized values of rf power, gas flow rate, time and pressure were found to be 200W, 240sccm, 20minutes and 1Torr respectively, which yielded high etch rate (80nm/min), low surface roughness (5nm) and nearly vertical side-walls (89°).

  16. Inductively coupled helium plasma torch

    SciTech Connect

    Montaser, Akbar; Chan, Shi-Kit; Van Hoven, Raymond L.

    1989-01-01

    An inductively coupled plasma torch including a base member, a plasma tube and a threaded insert member within the plasma tube for directing the plasma gas in a tangential flow pattern. The design of the torch eliminates the need for a separate coolant gas tube. The torch can be readily assembled and disassembled with a high degree of alignment accuracy.

  17. A multi-scale approach to characterize pure CH4, CF4, and CH4/CF4 mixtures

    NASA Astrophysics Data System (ADS)

    Chattoraj, Joyjit; Risthaus, Tobias; Rubner, Oliver; Heuer, Andreas; Grimme, Stefan

    2015-04-01

    In this study, we develop three intermolecular potentials for methane (CH4), tetrafluoromethane (CF4), and CH4/CF4 dimers using a novel ab initio method. The ultimate goal is to understand microscopically the phase-separation in CH4/CF4 systems, which takes place in the liquid states near their freezing points. Monte-Carlo (MC) simulations of the pure CH4 system are performed using the ab initio energies to verify the potential. The simulations reproduce quite well the experimentally known liquid densities, the internal energies, the second virial coefficients, and the radial distribution function. The essentially six-dimensional (6D) ab initio potential is then reduced to a one-dimensional (1D) effective potential using the inverse Monte-Carlo technique. This potential, too, successfully reproduces the experimental results. Interestingly, the MC study cannot be extended to the pure CF4 system and the CH4/CF4 mixed system because the two respective ab initio potentials present very rough potential landscapes. This renders the interpolation of energies for the MC simulations and thus the multi-scale approach unreliable. It suggests, however, a possible driving force for the experimentally observed phase separation of the CH4/CF4 system at low temperatures. Furthermore, we carefully study the determination of 1D effective potentials via inverse MC techniques. We argue that to a good approximation the temperature dependence of the 1D potentials can be estimated via reweighting techniques for a fixed temperature.

  18. Detection of Chamber Conditioning by CF4 in the GEC Cell

    NASA Technical Reports Server (NTRS)

    Cruden, Brett A.; Rao, M. V. V. S.; Sharma, S. P.; Meyyappan, M.; Arnold, James (Technical Monitor)

    2001-01-01

    During oxide etch processes, buildup of fluorocarbon residues on reactor sidewalks can cause to drift and will necessitate time for conditioning and cleaning of the reactor. Various measurements in CF4 and Ar plasmas are made in an attempt to identify a metric able to indicate the chamber condition. Mass spectrometry and a Langmuir probe shows that the buildup of fluorocarbon films on the reactor surface causes a decrease in plasma floating potential, plasma potential, and ion energy in argon plasmas. This change in floating potential is also observed in CF4 plasma operation, and occurs primarily during the first hour and a half of plasma operation. A slight rise in electron density is also observed in the argon plasmas. Because the change is seen in an argon plasma, it is indicative of altered physical, not chemical, plasma-surface interactions. Specifically, the insulating films deposited on metal surfaces alter the electromagnetic fields seen by the plasma, affecting various parameters including the floating potential and electron density. An impedance probe placed on the inductive coil shows a slight reduction in plasma impedance due to this rising electron density. The optical emission of several species, including CF, C2, atomic Si and atomic C, is also monitored for changes in density resulting from the buildup of film on the chamber wall. Changes in the optical emission spectrum are comparable to the noise levels in their measurement.

  19. Quenching the scintillation in CF4 Cherenkov gas radiator

    NASA Astrophysics Data System (ADS)

    Blake, T.; D`Ambrosio, C.; Easo, S.; Eisenhardt, S.; Fitzpatrick, C.; Forty, R.; Frei, C.; Gibson, V.; Gys, T.; Harnew, N.; Hunt, P.; Jones, C. R.; Lambert, R. W.; Matteuzzi, C.; Muheim, F.; Papanestis, A.; Perego, D. L.; Piedigrossi, D.; Plackett, R.; Powell, A.; Topp-Joergensen, S.; Ullaland, O.; Websdale, D.; Wotton, S. A.; Wyllie, K.

    2015-08-01

    CF4 is used as a Cherenkov gas radiator in one of the Ring Imaging Cherenkov detectors at the LHCb experiment at the CERN Large Hadron Collider. CF4 is well known to have a high scintillation photon yield in the near and far VUV, UV and in the visible wavelength range. A large flux of scintillation photons in our photon detection acceptance between 200 and 800 nm could compromise the particle identification efficiency. We will show that this scintillation photon emission system can be effectively quenched, consistent with radiationless transitions, with no significant impact on the photons resulting from Cherenkov radiation.

  20. Closed inductively coupled plasma cell

    DOEpatents

    Manning, T.J.; Palmer, B.A.; Hof, D.E.

    1990-11-06

    A closed inductively coupled plasma cell generates a relatively high power, low noise plasma for use in spectroscopic studies is disclosed. A variety of gases can be selected to form the plasma to minimize spectroscopic interference and to provide a electron density and temperature range for the sample to be analyzed. Grounded conductors are placed at the tube ends and axially displaced from the inductive coil, whereby the resulting electromagnetic field acts to elongate the plasma in the tube. Sample materials can be injected in the plasma to be excited for spectroscopy. 1 fig.

  1. Closed inductively coupled plasma cell

    DOEpatents

    Manning, Thomas J.; Palmer, Byron A.; Hof, Douglas E.

    1990-01-01

    A closed inductively coupled plasma cell generates a relatively high power, low noise plasma for use in spectroscopic studies. A variety of gases can be selected to form the plasma to minimize spectroscopic interference and to provide a electron density and temperature range for the sample to be analyzed. Grounded conductors are placed at the tube ends and axially displaced from the inductive coil, whereby the resulting electromagnetic field acts to elongate the plasma in the tube. Sample materials can be injected in the plasma to be excited for spectroscopy.

  2. Etching of Copper Coated Mylar Tubes With CF-4 Gas

    DOE PAGESBeta

    Ecklund, Karl M.; Hartman, Keith W.; Hebert, Michael J.; Wojcicki, Stanley G.

    1996-04-01

    Using 5 mm diameter copper coated mylar straw tubes at a potential of 2.30 KV relative to a concentric 20 (mu)m diameter gold-plated tungsten anode, it has been observed that with very low flow rates of CF4-based gases the conductive copper cathode material may be removed entirely from the mylar surface.

  3. Perspectives on Geospace Plasma Coupling

    SciTech Connect

    Baker, Daniel N.

    2011-01-04

    There are a large variety of fascinating and instructive aspects to examining the coupling of mass and energy from the solar wind into the Earth's magnetosphere. Past research has suggested that magnetic reconnection (in a fluid sense) on the day-side magnetopause plays the key role in controlling the energy coupling. However, both linear and nonlinear coupling processes involving kinetic effects have been suggested through various types of innovative data analysis. Analysis and modeling results have also indicated a prominent role for multi-scale processes of plasma coupling. Examples include evidence of control by solar wind turbulence in the coupling sequence and localized (finite gyroradius) effects in dayside plasma transport. In this paper we describe several solar wind-magnetosphere coupling scenarios. We particularly emphasize the study of solar wind driving of magnetospheric substorm, and related geomagnetic disturbances.

  4. Langmuir Probe Measurements in an Inductively Coupled GEC Reference Cell Plasma

    NASA Technical Reports Server (NTRS)

    Ji, J. S.; Kim, J. S.; Cappelli, M. A.; Sharma, S. P.; Arnold, J. O. (Technical Monitor)

    1998-01-01

    Measurements of electron number density, electron temperature, and electron energy distribution function (EEDF) using a compensated Langmuir probe have been performed on an inductively (transformer ) coupled Gaseous Electronics Conference (GEC) reference cell plasma. The plasma source is operated with CH4, CF4, or their mixtures with argon. The effect of independently driving the electrode supporting the wafer on the probe data is studied. In particular, we find that the plasma structure depends on the phase in addition to the magnitude of the power coupled to the electrode relative to that of the transformer coil. The Langmuir probe is translated in a plane parallel to the electrode to investigate the spatial structure of the plasma. The probe data is also compared with fluid model predictions.

  5. Mobile inductively coupled plasma system

    DOEpatents

    D`Silva, A.P.; Jaselskis, E.J.

    1999-03-30

    A system is described for sampling and analyzing a material located at a hazardous site. A laser located remotely from the hazardous site is connected to an optical fiber, which directs laser radiation proximate the material at the hazardous site. The laser radiation abates a sample of the material. An inductively coupled plasma is located remotely from the material. An aerosol transport system carries the ablated particles to a plasma, where they are dissociated, atomized and excited to provide characteristic optical reduction of the elemental constituents of the sample. An optical spectrometer is located remotely from the site. A second optical fiber is connected to the optical spectrometer at one end and the plasma source at the other end to carry the optical radiation from the plasma source to the spectrometer. 10 figs.

  6. The ν2 + ν4 band of 12CF 4

    NASA Astrophysics Data System (ADS)

    Patterson, Chris W.; McDowell, Robin S.; Nereson, Norris G.; Begley, Richard F.; Galbraith, Harold W.; Krohn, Burton J.

    1980-03-01

    From a high-resolution diode laser spectrum of cooled 12CF 4, line assignments in ν2 + ν4 at 1066.4 cm -1 have been made for tetrahedral subspecies to J = 20, and in many cases to higher J. Spectroscopic constants have been obtained from a least-squares fit of the Hamiltonian, and the relative intensities of the assigned lines have been calculated. The ground- and excited-state rotational constants, Coriolis constant, and splitting of the F1 and F2 vibrational substates have the values a.The CF bond length in the ground vibrational state is thus r 0 = 1.31752 ± 0.00007 Å. The analysis of a combination band such as this provides a method of obtaining ground-state spectroscopic constants of spherical-top molecules directly from the infrared spectrum, without the necessity of measuring weak "forbidden" transitions. The assignments allow accurate predictions of the frequencies emitted by the CO 2-pumped CF 4 laser.

  7. Electron heating and the electrical asymmetry effect in dual-frequency capacitive CF4 discharges

    NASA Astrophysics Data System (ADS)

    Schulze, J.; Derzsi, A.; Donkó, Z.

    2011-08-01

    The electron heating and the electrical asymmetry effect (EAE) in electronegative dual-frequency capacitive CF4 discharges are investigated by particle-in-cell simulations and analytical modeling. One electrode is driven at 13.56 and 27.12 MHz with fixed but adjustable phase shift, θ, between the driving harmonics. First, the electron heating and ionization rates are studied, space and time resolved, for different phase shifts and pressures. The results are compared with those obtained for an electropositive gas (argon). In contrast to classical α- or γ-mode operation, we observe the electron heating and ionization rates to be high inside the bulk. This bulk heating mode is a consequence of the high electronegativity of CF4 discharges, where the conductivity in the bulk is low due to the low density of electrons. Thus, a high electric field builds up to drive the RF current through the bulk causing a high electron mean energy and ionization rate in the discharge center. Second, we investigate the consequences of the bulk heating on the EAE. We focus on the electrical generation of a dc self-bias as a function of θ and the quality of the separate control of the ion mean energy and flux at the electrodes by tuning θ. Compared with argon discharges the high voltage drop across the plasma bulk and the specific ionization dynamics affect the bias generation and the separate control of ion properties. These effects are described and explained by an analytical model.

  8. Estimation of Electron Temperature and Frequency Components in a Dual Frequency Capacitively-Coupled Plasma Processing Reactor

    NASA Astrophysics Data System (ADS)

    Ito, Toru; Mo, Yun; Masahiro, Horigome

    2008-10-01

    The measurement of electron temperature in RF plasma sources with Langmuir probes is difficult because of the influence of rf noise. We attempted to estimate the electron temperature in a capacitively-coupled plasma processing reactor with a Surface Wave Probe [1] which employs microwaves. We also estimated the frequency spectrum with the sensitive PAP [1, 2]. We measured the harmonics which appeared in the bulk plasma for various experimental conditions in the dual-frequency [60 MHz and 2MHz] capacitively-coupled plasma processing reactor. We estimated RF power spectra for several experimental conditions like RF power [500-2000W], gas pressure [3-20Pa], and gas species [Ar, CF4]. The measurement results suggest the existence of energy transport among several frequency spectrum. [1ex] [1] K. Nakamura, M. Ohata, and H. Sugai: J. Vac. Sci. Technol. A 21, 325 (2003). [0pt] [2] T. Shirakawa and H. Sugai : Jpn. J. Appl. Phys. 32, 5129 (1993).

  9. Comparative analysis of barium titanate thin films dry etching using inductively coupled plasmas by different fluorine-based mixture gas

    PubMed Central

    2014-01-01

    In this work, the inductively coupled plasma etching technique was applied to etch the barium titanate thin film. A comparative study of etch characteristics of the barium titanate thin film has been investigated in fluorine-based (CF4/O2, C4F8/O2 and SF6/O2) plasmas. The etch rates were measured using focused ion beam in order to ensure the accuracy of measurement. The surface morphology of etched barium titanate thin film was characterized by atomic force microscope. The chemical state of the etched surfaces was investigated by X-ray photoelectron spectroscopy. According to the experimental result, we monitored that a higher barium titanate thin film etch rate was achieved with SF6/O2 due to minimum amount of necessary ion energy and its higher volatility of etching byproducts as compared with CF4/O2 and C4F8/O2. Low-volatile C-F compound etching byproducts from C4F8/O2 were observed on the etched surface and resulted in the reduction of etch rate. As a result, the barium titanate films can be effectively etched by the plasma with the composition of SF6/O2, which has an etch rate of over than 46.7 nm/min at RF power/inductively coupled plasma (ICP) power of 150/1,000 W under gas pressure of 7.5 mTorr with a better surface morphology. PMID:25278821

  10. Increase of Stratospheric Carbon Tetrafluoride (CF4) Based on ATMOS Observations from Space

    NASA Technical Reports Server (NTRS)

    Zander, R.; Solomon, S.; Mahieu, E.; Goldman, A.; Rinsland, C. P.; Gunson, M. R.; Abrams, M. C.; Chang, A. Y.; Michelsen, H. A.; Newchurch, M. J.; Stiller, G. P.

    1996-01-01

    Stratospheric volume mixing ratio profiles of carbon tetrafluoride, CF4, obtained with the Atmospheric Trace Molecule Spectroscopy (ATMOS) instrument during the ATLAS (Atmospheric Laboratory for Applications and Science) -3 mission of 1994 are reported. Overall the profiles are nearly constant over the altitude range 20 to 50 km, indicative of the very long lifetime of CF4 in the atmosphere. In comparison to the stratospheric values of CF4 inferred from the ATMOS/Spacelab 3 mission of 1985, the 1994 concentrations are consistent with an exponential increase of (1.6 +/- 0.6)% yr(exp -1). This increase is discussed with regard to previous results and likely sources of CF4 at the ground. Further, it is shown that simultaneous measurements of N2O and CF4 provide a means of constraining the lower limit of the atmospheric lifetime of CF4 at least 2,300 years, two sigma.

  11. Adsorption of CF4 on graphite preplated with a monolayer of CF3Cl

    NASA Astrophysics Data System (ADS)

    Thomas, Petros; Velazquez, Daniel; Hess, George B.

    2011-03-01

    We report a study of the adsorption of CF4 on graphite preplated with a monolayer of CF3Cl, using infrared reflection absorption spectroscopy combined with ellipsometry. The saturated vapor pressure of CF3Cl is nearly 3 orders of magnitude smaller than that of CF4 at the same temperature, so the main control variables are the temperature and the pressure (or chemical potential) of CF4, together with the initial coverage of CF3Cl. The temperature range covered is 60-105 K. We find that, if the initial monolayer of CF3Cl is liquid, CF4 continuously displaces CF3Cl by substitution in the monolayer. If the initial monolayer of CF3Cl is solid, due to either lower temperature or compression, CF4 condenses as a second layer on the top of the CF3Cl layer, with only slight mixing with the original layer. This behavior persists to multiple layers of CF4.

  12. Characterization of the tomato Cf-4 gene for resistance to Cladosporium fulvum identifies sequences that determine recognitional specificity in Cf-4 and Cf-9.

    PubMed Central

    Thomas, C M; Jones, D A; Parniske, M; Harrison, K; Balint-Kurti, P J; Hatzixanthis, K; Jones, J D

    1997-01-01

    In many interactions between plants and their pathogens, resistance to infection is specified by plant resistance (R) genes and corresponding pathogen avirulence (Avr) genes. In tomato, the Cf-4 and Cf-9 resistance genes map to the same location but confer resistance to Cladosporium fulvum through recognition of different avirulence determinants (AVR4 and AVR9) by a molecular mechanism that has yet to be determined. Here, we describe the cloning and characterization of Cf-4, which also encodes a membrane-anchored extracellular glycoprotein. Cf-4 contains 25 leucine-rich repeats, which is two fewer than Cf-9. The proteins have > 91% identical amino acids. DNA sequence comparison suggests that Cf-4 and Cf-9 are derived from a common progenitor sequence. Amino acid differences distinguishing Cf-4 and Cf-9 are confined to their N termini, delimiting a region that determines the recognitional specificity of ligand binding. The majority of these differences are in residues interstitial to those of the leucine-rich repeat consensus motif. Many of these residues are predicted to form a solvent-exposed surface that can interact with the cognate ligand. Both Cf-4 and Cf-9 are located within a 36-kb region comprising five tandemly duplicated homologous genes. These results provide further insight into the molecular basis of pathogen perception by plants and the organization of complex R gene loci. PMID:9437864

  13. Evidence for crustal degassing of CF4 and SF6 in Mojave Desert groundwaters

    USGS Publications Warehouse

    Deeds, D.A.; Vollmer, M.K.; Kulongoski, J.T.; Miller, B.R.; Muhle, J.; Harth, C.M.; Izbicki, J.A.; Hilton, David R.; Weiss, R.F.

    2008-01-01

    Dissolved tetrafluoromethane (CF4) and sulfur hexafluoride (SF6) concentrations were measured in groundwater samples from the Eastern Morongo Basin (EMB) and Mojave River Basin (MRB) located in the southern Mojave Desert, California. Both CF4 and SF6 are supersaturated with respect to equilibrium with the preindustrial atmosphere at the recharge temperatures and elevations of the Mojave Desert. These observations provide the first in situ evidence for a flux of CF4 from the lithosphere. A gradual basin-wide enhancement in dissolved CF4 and SF6 concentrations with groundwater age is consistent with release of these gases during weathering of the surrounding granitic alluvium. Dissolved CF4 and SF6 concentrations in these groundwaters also contain a deeper crustal component associated with a lithospheric flux entering the EMB and MRB through the underlying basement. The crustal flux of CF4, but not of SF6, is enhanced in the vicinity of local active fault systems due to release of crustal fluids during episodic fracture events driven by local tectonic activity. When fluxes of CF4 and SF6 into Mojave Desert groundwaters are extrapolated to the global scale they are consistent, within large uncertainties, with the fluxes required to sustain the preindustrial atmospheric abundances of CF4 and SF6. ?? 2007 Elsevier Ltd. All rights reserved.

  14. Langmuir Probe Distortions and Probe Compensation in an Inductively Coupled Plasma

    NASA Technical Reports Server (NTRS)

    Ji, J. S.; Cappelli, M. A.; Kim, J. S.; Rao, M. V. V. S.; Sharma, S. P.

    1999-01-01

    In many RF discharges, Langmuir probe measurements are usually made against a background of sinusoidal (and not so sinusoidal) fluctuations in the plasma parameters such as the plasma potential (Vp), the electron number density (ne), and the electron temperature (Te). The compensation of sinusoidal fluctuations in Vp has been extensively studied and is relatively well understood. Less attention has been paid to the possible distortions introduced by small fluctuations in plasma density and/or plasma temperature, which may arise in the sheath and pre-sheath regions of RF discharges. Here, we present the results of a model simulation of probe characteristics subject to fluctuations in both Vp and ne. The modeling of probe distortion due to possible fluctuations in Te is less straightforward. A comparison is presented of calculations with experimental measurements using a compensated and uncompensated Langmuir probe in an inductively coupled GEC reference cell plasma, operating on Ar and Ar/CF4 mixtures. The plasma parameters determined from the compensated probe characteristics are compared to previous measurements of others made in similar discharges, and to our own measurements of the average electron density derived from electrical impedance measurements.

  15. Ignition delay of a pulsed inductively coupled plasma (ICP) in tandem with an auxiliary ICP

    NASA Astrophysics Data System (ADS)

    Liu, Lei; Sridhar, Shyam; Donnelly, Vincent M.; Economou, Demetre J.

    2015-12-01

    Plasma ignition delays were observed in a ‘main’ inductively coupled plasma (ICP), in tandem with an ‘auxiliary’ ICP. The Faraday-shielded ICPs were separated by a grounded metal grid. Power (13.56 MHz) to the main ICP was pulsed with a frequency of 1 kHz, while the auxiliary ICP was operated in continuous wave (cw) mode. In chlorine plasmas, ignition delay was observed for duty cycles greater than 60% and, in contrast to expectation, the delay was longer with increasing duty cycle up to ~99.5%. The ignition delay could be varied by changing the auxiliary and/or main ICP power. Langmuir probe measurements provided the temporal evolution of electron temperature, and electron and positive ion densities. These measurements revealed that the plasma was ignited shortly after the decaying positive ion density (n +), in the afterglow of the main ICP, reached the density ({{n}+},\\text{aux} ) prevailing when only the auxiliary ICP was powered. At that time, production of electrons began to dominate their loss in the main ICP, due to hot electron injection from the auxiliary ICP. As a result, {{n}\\text{e}} increased from a value below {{n}\\text{e,\\text{aux}}} , improving inductive power coupling efficiency, further increasing plasma density leading to plasma ignition. Plasma ignition delay occurred when the afterglow of the pulsed plasma was not long enough for the ion density to reach {{n}+},\\text{aux} during the afterglow. Besides Cl2, plasma ignition delays were also observed in other electronegative gases (SF6, CF4/O2 and O2) but not in an electropositive gas (Ar).

  16. Laser ablation inductively coupled plasma mass spectrometry

    SciTech Connect

    Durrant, S.F.

    1996-07-01

    Laser ablation for solid sample introduction to inductively coupled plasma mass spectrometry for bulk and spatially-resolved elemental analysis is briefly reviewed. {copyright} {ital 1996 American Institute of Physics.}

  17. Inductive coupled radio frequency plasma bridge neutralizer.

    PubMed

    Scholze, F; Tartz, M; Neumann, H

    2008-02-01

    A 13.56 MHz radio frequency plasma bridge neutralizer (rf-PBN) for ion thruster applications as well as ion beam surface processing of insulating materials is presented. The energy for the plasma excitation is inductively coupled into the plasma chamber. Because no components are located inside the plasma, the lifetime of the rf-PBN is expected to be very long. A compact tuning system adapts the input power to the plasma impedance. The electron current may be controlled over a wide range by the rf input power. An electron current of up to 1.6 A has been extracted. PMID:18315215

  18. Advances in Dusty Plasmas 5.Strongly Coupled Dusty Plasmas

    NASA Astrophysics Data System (ADS)

    Hamaguchi, Satoshi

    We review thermodynamical and dynamical properties of strongly coupled dusty plasmas, focusing on the recent development of molecular dynamics (MD) simulations. In the present paper, dusty plasmas are modeled by the Yukawa system, which is a collection of particles interacting through Yukawa (i.e., screened Coulomb) potentials. The phase diagram, wave dispersion relations and some transport coefficients of Yukawa systems are discussed.

  19. Description and preliminary calibration results for the Langley hypersonic CF4 tunnel

    NASA Technical Reports Server (NTRS)

    Midden, R. E.; Miller, C. G.

    1978-01-01

    A detailed description of the hypersonic CF4 tunnel is presented along with discussion of the basic components, instrumentation, and operating procedure. Operational experience with the CF4 reclaimer and lead-bath heater is discussed. Comparison of measured and predicted shock detachment distance on a sphere and pressure distributions measured on a sharp leading-edge flat plate revealed the absence of significant flow nonuniformity and lent creditability to predicted free stream flow conditions. The economic operation of this facility centers about the CF4 reclaimer, which was designed to operate at an efficiency of 90 to 95 percent. A number of modifications were made to the reclaimer system to improve its performance, and presently, the system reclaims approximately 75 percent of the test gas. Even with current budgetary constraints, this efficiency permits the CF4 tunnel to be operated as a viable research wind tunnel.

  20. Beam-Plasma Instabilities in Strongly Coupled Plasmas

    NASA Astrophysics Data System (ADS)

    Kalman, Gabor J.; Rosenberg, Marlene

    2001-10-01

    Strongly coupled dusty plasmas under laboratory conditions are permeated by streaming ions: in this scenario beam- plasma instabilities may be excited. The strong coupling between the dust grains, however, fundamentally affects the condition for instability and renders the conventional Vlasov treatment entirely inadequate. Based on the Quasilocalized Charge Approximation [1,2,3] we develop an analysis of instabilities generated by the relative streaming of a weakly coupled and a strongly coupled plasma. The central role in this formalism is played by the Dynamical Matrix D(k), a functional of the equilibrium correlation function, determined in our earlier work [2,3]. Novel physical effects generated by strong coupling alter both the beam resonance condition and the coupling between the beam and the plasma modes. Our analysis covers both resonant and non-resonant, as well as resistive instabilities. [1] Kenneth I. Golden and Gabor J. Kalman, Phys. Plasmas, 7, 14 (2000) [2] M. Rosenberg and G. Kalman, Phys. Rev. E 56, 7166 (1997) [3] G. Kalman, M.Rosenberg and H. E. DeWitt, Phys. Rev Lett. 84, 6030 (2000)

  1. High-energy negative ion beam obtained from pulsed inductively coupled plasma for charge-free etching process

    NASA Astrophysics Data System (ADS)

    Vozniy, O. V.; Yeom, G. Y.

    2009-06-01

    Negative ions in conventional inductively coupled plasma are often more chemically active than positive ions (for example, in CF4 or SF6 plasmas), but inconveniently they are trapped inside the sheath and cannot be used for high-energy surface etching in sources with a grid-type acceleration system. In this work we describe a method of positive and negative ion extraction that allows the energy and flux of oppositely charged particles to be varied independently. Then by scattering the ions off from a metal surface, it is possible to form a high-energy beam of neutrals from the negative ions by using the low-energy positive component of the beam current for better charge compensation.

  2. Adsorption of CF4 on graphite preplated with a monolayer of CF3Cl.

    PubMed

    Thomas, Petros; Velazquez, Daniel; Hess, George B

    2011-03-21

    We report a study of the adsorption of CF(4) on graphite preplated with a monolayer of CF(3)Cl, using infrared reflection absorption spectroscopy combined with ellipsometry. The saturated vapor pressure of CF(3)Cl is nearly 3 orders of magnitude smaller than that of CF(4) at the same temperature, so the main control variables are the temperature and the pressure (or chemical potential) of CF(4), together with the initial coverage of CF(3)Cl. The temperature range covered is 60-105 K. We find that, if the initial monolayer of CF(3)Cl is liquid, CF(4) continuously displaces CF(3)Cl by substitution in the monolayer. If the initial monolayer of CF(3)Cl is solid, due to either lower temperature or compression, CF(4) condenses as a second layer on the top of the CF(3)Cl layer, with only slight mixing with the original layer. This behavior persists to multiple layers of CF(4). PMID:21428651

  3. Characterization and Application of a Planar Radio - Inductively-Coupled Plasma Source for the Production of Barrier Coatings.

    NASA Astrophysics Data System (ADS)

    Mahoney, Leonard Joseph

    A planar radio-frequency (rf) inductively-coupled plasma (ICP) source is used to produce fluorocarbon discharges (CF_4/Ar) to fluorinate the surface of high-density polyethylene (HDPE). Using this system, concurrent studies of discharge characteristics, permeation properties of treated polymers and polymer surface characteristics are conducted to advance the use of plasma-fluorinated polymer surfaces as a barrier layer for automotive applications. Langmuir probes are used to determine spatial distribution of charged-particle and space-potential characteristics in Ar and CF_4/Ar discharges and to show the influence of the spatial distribution of the heating regions and the reactor boundaries on the discharge uniformity. Langmuir probes are also used to identify rf anisotropic drift motion of electrons in the heating regions of the source and transient high-energy electron features in pulsed discharges. These latter features allow pulsed ICP sources to be operated at low time-averaged powers that are necessary to treat thermally sensitive polymers. Fourier Transform Infrared (FITR) spectroscopy is used to measure the dissociation of fluorocarbon gases and to explore differences between pulsed- and continuous -power operation. Dissociation levels of CF_4 (50-85%) using pulsed-power operation are as high as that for continuous operation, even though the net time -averaged power is far less with pulsed operation. The result suggests that pulsed fluorocarbon discharges possess high concentrations of chemically-active species needed for rapid surface fluorination. A gravimetric permeation cup method is used to measure the permeation rate of test fuels through HDPE membranes, and electron spectroscopy for chemical analysis (ESCA) studies are performed to determine the stoichiometry and thickness of the barrier layer. From these studies we find that a 50-70 A thick, polar, fluoro-hydrocarbon over layer reduces the permeation of isooctane/toluene/methanol mixtures by a

  4. Atmospheric observations for quantifying emissions of point-source synthetic greenhouse gases (CF4, NF3 and HFC-23)

    NASA Astrophysics Data System (ADS)

    Arnold, Tim; Manning, Alistair J.; Li, Shanlan; Kim, Jooil; Park, Sunyoung; Fraser, Paul J.; Mitrevski, Blagoj; Steele, L. Paul; Krummel, Paul B.; Mühle, Jens; Weiss, Ray F.

    2016-04-01

    The fluorinated species carbon tetrafluoride (CF4; PFC-14), nitrogen trifluoride (NF3) and trifluoromethane (CHF3; HFC-23) are potent greenhouse gases with 100-year global warming potentials of 6,630, 16,100 and 12,400, respectively. Unlike the majority of CFC-replacement compounds that are emitted from fugitive and mobile emission sources, these gases are largely emitted from large single point sources - semiconductor manufacturing facilities (all three), aluminium smelting plants (CF4) and chlorodifluoromethane factories (HFC-23). In this work we show the potential for atmospheric measurements to understand regional sources of these gases and to highlight emission 'hotspots'. We target our analysis on measurements from two Advanced Global Atmospheric Gases Experiment (AGAGE) long term monitoring sites that are particularly sensitive to regional emissions of these gases: Gosan on Jeju Island in the Republic of Korea and Cape Grim on Tasmania in Australia. These sites measure CF4, NF3 and HFC-23 alongside a suite of greenhouse and stratospheric ozone depleting gases every two hours using automated in situ gas-chromatography mass-spectrometry instrumentation. We couple each measurement to an analysis of air history using the regional atmospheric transport model NAME (Numerical Atmospheric dispersion Modelling Environment) driven by 3D meteorology from the Met Office's Unified Model, and use a Bayesian inverse method (InTEM - Inversion Technique for Emission Modelling) to calculate yearly emission changes over a decade (2005-2015) at high spatial resolution. At present these gases make a small contribution to global radiative forcing, however, given that their impact could rise significantly and that point sources of such gases can be mitigated, atmospheric monitoring could be an important tool for aiding emissions reduction policy.

  5. Starter for inductively coupled plasma tube

    DOEpatents

    Hull, D.E.; Bieniewski, T.M.

    1988-08-23

    A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initiate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation. 1 fig.

  6. Starter for inductively coupled plasma tube

    DOEpatents

    Hull, Donald E.; Bieniewski, Thomas M.

    1988-01-01

    A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation.

  7. An atmospheric photochemical source of the persistent greenhouse gas CF4

    NASA Astrophysics Data System (ADS)

    Jubb, Aaron M.; McGillen, Max R.; Portmann, Robert W.; Daniel, John S.; Burkholder, James B.

    2015-11-01

    A previously uncharacterized atmospheric source of the persistent greenhouse gas tetrafluoromethane, CF4, has been identified in the UV photolysis of trifluoroacetyl fluoride, CF3C(O)F, which is a degradation product of several halocarbons currently present in the atmosphere. CF4 quantum yields in the photolysis of CF3C(O)F were measured at 193, 214, 228, and 248 nm, wavelengths relevant to stratospheric photolysis, to be (75.3 ± 1) × 10-4, (23.7 ± 0.4) × 10-4, (6.6 ± 0.2) × 10-4, and ≤0.4 × 10-4, respectively. A 2-D atmospheric model was used to estimate the contribution of the photochemical source to the global CF4 budget. The atmospheric photochemical production of CF4 from CF3CH2F (HFC-134a), CF3CHFCl (HCFC-124), and CF3CCl2F (CFC-114a) per molecule emitted was calculated to be (1-2.5) × 10-5, 1.0 × 10-4, and 2.8 × 10-3, respectively. Although CF4 photochemical production was found to be relatively minor at the present time, the identified mechanism demonstrates that long-lived products with potential climate impacts can be formed from the atmospheric breakdown of shorter-lived source gases.

  8. Wavelength scaling of laser plasma coupling

    SciTech Connect

    Kruer, W.L.

    1983-11-03

    The use of shorter wavelength laser light both enhances collisional absorption and reduces deleterious collective plasma effects. Coupling processes which can be important in reactor-size targets are briefly reviewed. Simple estimates are presented for the intensity-wavelength regime in which collisional absorption is high and collective effects are minimized.

  9. Computational analysis and preliminary redesign of the nozzle contour of the Langley hypersonic CF4 tunnel

    NASA Technical Reports Server (NTRS)

    Thompson, R. A.; Sutton, Kenneth

    1987-01-01

    A computational analysis, modification, and preliminary redesign study was performed on the nozzle contour of the Langley Hypersonic CF4 Tunnel. This study showed that the existing nozzle was contoured incorrectly for the design operating condition, and this error was shown to produce the measured disturbances in the exit flow field. A modified contour was designed for the current nozzle downstream of the maximum turning point that would provide a uniform exit flow. New nozzle contours were also designed for an exit Mach number and Reynolds number combination which matches that attainable in the Langley 20-Inch Mach 6 Tunnel. Two nozzle contours were designed: one having the same exit radius but a larger mass flow rate than that of the existing CF4 Tunnel, and the other having the same mass flow rate but a smaller exit radius than that of the existing CF4 Tunnel.

  10. Enhanced laser beam coupling to a plasma

    DOEpatents

    Steiger, Arno D.; Woods, Cornelius H.

    1976-01-01

    Density perturbations are induced in a heated plasma by means of a pair of oppositely directed, polarized laser beams of the same frequency. The wavelength of the density perturbations is equal to one half the wavelength of the laser beams. A third laser beam is linearly polarized and directed at the perturbed plasma along a line that is perpendicular to the direction of the two opposed beams. The electric field of the third beam is oriented to lie in the plane containing the three beams. The frequency of the third beam is chosen to cause it to interact resonantly with the plasma density perturbations, thereby efficiently coupling the energy of the third beam to the plasma.

  11. Terrestrial Sources of Perfluorinated Gases: Excess CF4 and SF6 in Mojave Desert Groundwaters

    NASA Astrophysics Data System (ADS)

    Deeds, D. A.; Vollmer, M. K.; Kulongoski, J. T.; Miller, B. R.; Hilton, D. R.; Izbicki, J. A.; Harth, C. M.; Weiss, R. F.

    2004-12-01

    The recent discovery of perfluorinated gases in fluid inclusions of granites and fluorites suggests a geologic source for the estimated 40 parts-per-trillion (ppt) of tetrafluoromethane (CF4) and <0.006 ppt of sulfur hexafluoride (SF6) in the preindustrial atmosphere. The accumulation of these gases in groundwaters with long residence times enables the detection of even small emissions from the surrounding aquifer material. We have measured high concentrations of CF4 and SF6 in groundwaters from the Mojave Desert, California. Dissolved SF6 was extracted by a purge and trap technique and analyzed by gas chromatography with electron capture detection. Dissolved CF4 was sampled by headspace extraction, using liquid helium to cryofocus the analytes prior to injection into the Medusa gas chromatograph/quadrupole mass spectrometer analytical system. Current precisions and accuracies for these measurements are on the order of 2% for both gases. Initial measurements of dissolved CF4 concentrations range from ˜0.05 to ˜1.5 pmol kg-1, about 5 to 15 times higher than expected for water in equilibrium with the preindustrial atmosphere at the local temperature and altitude of the recharge site. SF6 concentrations range from ˜0.3 to ˜16 fmol kg-1, up to several thousand times higher than expected for air-saturated water. Taking into account the large uncertainties in the estimated preindustrial atmospheric concentration of SF6, and in the estimated atmospheric lifetimes of both SF6 and CF4, the ratio of their excess abundances in Mojave Desert groundwaters agrees within an order of magnitude with the estimated ratio of natural fluxes required to sustain their preindustrial atmospheric concentrations. Relationships among dissolved CF4 and SF6 concentrations and the other geochemical properties of the aquifer, including groundwater residence times (ages), helium abundances and isotopic ratios, and fluoride concentrations will be presented.

  12. Ion Energy Distributions and their Relative Abundance in Inductively Coupled Plasmas

    NASA Technical Reports Server (NTRS)

    Kim, J. S.; Rao, M. V. V. S.; Cappelli, M. A.; Sharma, S. P.; Arnold, James O. (Technical Monitor)

    1998-01-01

    Study of kinetics of ions and neutrals produced in high density inductively coupled plasma (ICP) discharges is of great importance for achieving a high degree of plasma assisted deposition and etching. In this paper, we present the ion energy distributions (IEDs) of various ions arriving at the grounded lower electrode. The ions were energy as well as mass analyzed by a combination of electrostatic analyzer-quadrupole mass spectrometer for pure Ar and CF4/Ar mixtures. The measurements have been made at gas pressures ranging from 30 to 100 mTorr. In addition, the IEDs were measured when the wafer-supporting electrode was also rf-powered and the effect of the self-bias was observed in the energy distributions of ions. The shapes of the IEDs are discussed an related to the sheath properties and measured electrical waveforms, as a function of pressure and applied power. Relative ion intensities were obtained by integration of each ion kinetic energy distribution function over its energy range.

  13. Design Considerations in Capacitively Coupled Plasmas

    NASA Astrophysics Data System (ADS)

    Song, Sang-Heon; Ventzek, Peter; Ranjan, Alok

    2015-11-01

    Microelectronics industry has driven transistor feature size scaling from 10-6 m to 10-9 m during the past 50 years, which is often referred to as Moore's law. It cannot be overstated that today's information technology would not have been so successful without plasma material processing. One of the major plasma sources for the microelectronics fabrication is capacitively coupled plasmas (CCPs). The CCP reactor has been intensively studied and developed for the deposition and etching of different films on the silicon wafer. As the feature size gets to around 10 nm, the requirement for the process uniformity is less than 1-2 nm across the wafer (300 mm). In order to achieve the desired uniformity, the hardware design should be as precise as possible before the fine tuning of process condition is applied to make it even better. In doing this procedure, the computer simulation can save a significant amount of resources such as time and money which are critical in the semiconductor business. In this presentation, we compare plasma properties using a 2-dimensional plasma hydrodynamics model for different kinds of design factors that can affect the plasma uniformity. The parameters studied in this presentation include chamber accessing port, pumping port, focus ring around wafer substrate, and the geometry of electrodes of CCP.

  14. High-resolution spectroscopy of the 16-μm bending fundamental of CF 4

    NASA Astrophysics Data System (ADS)

    McDowell, Robin S.; Reisfeld, Martin J.; Galbraith, Harold W.; Krohn, Burton J.; Flicker, Herbert; Kennedy, R. Craig; Aldridge, Jack P.; Nereson, Norris G.

    1980-10-01

    The 16-μm bending fundamentals ( ν4) of 12CF 4, 13CF 4, and 14CF 4 have been observed at Doppler-limited resolution using a tunable PbSnSe semiconductor diode laser. The tetrahedral splittings of the rotational manifolds have been observed in all three branches, and in particular the dense and partially overlapping transitions in the Q branches have been resolved and assigned. A least-squares fit of the Hamiltonian, including off-diagonal terms, yielded five scalar and three tensor spectroscopic constants for each of the three isotopes. From these constants the upper-state rotational constant B4 and the Coriolis constant ζ4 have been calculated, together with some of the other molecular constants. An absorption feature at about 0.18 cm -1 to the red of the main Q branch of each isotopic species has been identified as the Q branch of ( ν2 + ν4) - ν2, which is the transition that lases when CF 4 is pumped by a CO 2 laser at 9.4 μm (i.e., in ν2 + ν4).

  15. Electron heating in capacitively coupled plasmas revisited

    NASA Astrophysics Data System (ADS)

    Lafleur, T.; Chabert, P.; Booth, J. P.

    2014-06-01

    We revisit the problem of electron heating in capacitively coupled plasmas (CCPs), and propose a method for quantifying the level of collisionless and collisional heating in plasma simulations. The proposed procedure, based on the electron mechanical energy conservation equation, is demonstrated with particle-in-cell simulations of a number of single and multi-frequency CCPs operated in regimes of research and industrial interest. In almost all cases tested, the total electron heating is comprised of collisional (ohmic) and pressure heating parts. This latter collisionless component is in qualitative agreement with the mechanism of electron heating predicted from the recent re-evaluation of theoretical models. Finally, in very electrically asymmetric plasmas produced in multi-frequency discharges, we observe an additional collisionless heating mechanism associated with electron inertia.

  16. Strongly coupled quark gluon plasma (SCQGP)

    NASA Astrophysics Data System (ADS)

    Bannur, Vishnu M.

    2006-07-01

    We propose that the reason for the non-ideal behaviour seen in lattice simulation of quark gluon plasma (QGP) and ultrarelativistic heavy ion collision experiments is that the QGP near Tc and above is a strongly coupled plasma (SCP), i.e., a strongly coupled quark gluon plasma (SCQGP). It is remarkable that the widely used equation of state of SCP in QED (quantum electrodynamics) very nicely fits lattice results on all QGP systems, with proper modifications to include colour degrees of freedom and the running coupling constant. Results on pressure in pure gauge, 2-flavours and 3-flavours QGP can all be explained by treating QGP as SCQGP, as demonstrated here. Energy density and speed of sound are also presented for all three systems. We further extend the model to systems with finite quark mass and reasonably good fits to lattice results are obtained for (2+1)-flavours and 4-flavours QGP. Hence it is a unified model, namely SCQGP, to explain the non-ideal QGP seen in lattice simulations with just two system dependent parameters.

  17. Generalized hydrodynamics model for strongly coupled plasmas

    NASA Astrophysics Data System (ADS)

    Diaw, A.; Murillo, M. S.

    2015-07-01

    Beginning with the exact equations of the Bogoliubov-Born-Green-Kirkwood-Yvon hierarchy, we obtain the density, momentum, and stress tensor-moment equations. We close the moment equations with two closures, one that guarantees an equilibrium state given by density-functional theory and another that includes collisions in the relaxation of the stress tensor. The introduction of a density functional-theory closure ensures self-consistency in the equation-of-state properties of the plasma (ideal and excess pressure, electric fields, and correlations). The resulting generalized hydrodynamics thus includes all impacts of Coulomb coupling, viscous damping, and the high-frequency (viscoelastic) response. We compare our results with those of several known models, including generalized hydrodynamic theory and models obtained using the Singwi-Tosi-Land-Sjolander approximation and the quasilocalized charge approximation. We find that the viscoelastic response, including both the high-frequency elastic generalization and viscous wave damping, is important for correctly describing ion-acoustic waves. We illustrate this result by considering three very different systems: ultracold plasmas, dusty plasmas, and dense plasmas. The new model is validated by comparing its results with those of the current autocorrelation function obtained from molecular-dynamics simulations of Yukawa plasmas, and the agreement is excellent. Generalizations of this model to mixtures and quantum systems should be straightforward.

  18. Plasma transport theory spanning weak to strong coupling

    SciTech Connect

    Daligault, Jérôme; Baalrud, Scott D.

    2015-06-29

    We describe some of the most striking characteristics of particle transport in strongly coupled plasmas across a wide range of Coulomb coupling strength. We then discuss the effective potential theory, which is an approximation that was recently developed to extend conventional weakly coupled plasma transport theory into the strongly coupled regime in a manner that is practical to evaluate efficiently.

  19. Interaction of O2 with CH4, CF4, and CCl4 by Molecular Beam Scattering Experiments and Theoretical Calculations.

    PubMed

    Cappelletti, David; Aquilanti, Vincenzo; Bartocci, Alessio; Nunzi, Francesca; Tarantelli, Francesco; Belpassi, Leonardo; Pirani, Fernando

    2016-07-14

    Gas phase collisions of O2 by CH4, CF4, and CCl4 have been investigated with the molecular beam technique by measuring both the integral cross section value, Q, and its dependence on the collision velocity, v. The adopted experimental conditions have been appropriate to resolve the oscillating "glory" pattern, a quantum interference effect controlled by the features of the intermolecular interaction, for all the three case studies. The analysis of the Q(v) data, performed by adopting a suitable representation of the intermolecular potential function, provided the basic features of the anisotropic potential energy surfaces at intermediate and large separation distances and information on the relative role of the physically relevant types of contributions to the global interaction. The present work demonstrates that while O2-CH4 and O2-CF4 are basically bound through the balance between size (Pauli) repulsion and dispersion attraction, an appreaciable intermolecular bond stabilization by charge transfer is operative in O2-CCl4. Ab initio calculations of the strength of the interaction, coupled with detailed analysis of electronic charge displacement promoted by the formation of the dimer, fully rationalizes the experimental findings. This investigation indicates that the interactions of O2, when averaged over its relative orientations, are similar to that of a noble gas (Ng), specifically Ar. We also show that the binding energy in the basic configurations of the prototypical Ng-CF4,CCl4 systems [ Cappelletti , D. ; Chem. Eur. J. 2015 , 21 , 6234 - 6240 ] can be reconstructed by using the interactions in Ng-F and Ng-Cl systems, previously characterized by molecular beam scattering experiments of state-selected halogen atom beams. This information is fundamental to approach the modeling of the weak intermolecular halogen bond. On the basis of the electronic polarizability, this also confirms [ Aquilanti , V. ; Angew. Chem., Int. Ed. 2005 , 44 , 2356 - 2360 ] that O2

  20. Strongly-coupled plasmas formed from laser-heated solids

    PubMed Central

    Lyon, M.; Bergeson, S. D.; Hart, G.; Murillo, M. S.

    2015-01-01

    We present an analysis of ion temperatures in laser-produced plasmas formed from solids with different initial lattice structures. We show that the equilibrium ion temperature is limited by a mismatch between the initial crystallographic configuration and the close-packed configuration of a strongly-coupled plasma, similar to experiments in ultracold neutral plasmas. We propose experiments to demonstrate and exploit this crystallographic heating in order to produce a strongly coupled plasma with a coupling parameter of several hundred. PMID:26503293

  1. Strongly-coupled plasmas formed from laser-heated solids.

    PubMed

    Lyon, M; Bergeson, S D; Hart, G; Murillo, M S

    2015-01-01

    We present an analysis of ion temperatures in laser-produced plasmas formed from solids with different initial lattice structures. We show that the equilibrium ion temperature is limited by a mismatch between the initial crystallographic configuration and the close-packed configuration of a strongly-coupled plasma, similar to experiments in ultracold neutral plasmas. We propose experiments to demonstrate and exploit this crystallographic heating in order to produce a strongly coupled plasma with a coupling parameter of several hundred. PMID:26503293

  2. Titanium oxidation by rf inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Valencia-Alvarado, R.; de la Piedad-Beneitez, A.; López-Callejas, R.; Barocio, S. R.; Mercado-Cabrera, A.; Peña-Eguiluz, R.; Muñoz-Castro, A. E.; Rodríguez-Méndez, B. G.; de la Rosa-Vázquez, J. M.

    2014-05-01

    The development of titanium dioxide (TiO2) films in the rutile and anatase phases is reported. The films have been obtained from an implantation/diffusion and sputtering process of commercially pure titanium targets, carried out in up to 500 W plasmas. The experimental outcome is of particular interest, in the case of anatase, for atmospheric pollution degradation by photocatalysis and, as to the rutile phase, for the production of biomaterials required by prosthesis and implants. The reactor employed consists in a cylindrical pyrex-like glass vessel inductively coupled to a 13.56 MHz RF source. The process takes place at a 5×10-2 mbar pressure with the target samples being biased from 0 to -3000 V DC. The anatase phase films were obtained from sputtering the titanium targets over glass and silicon electrically floated substrates placed 2 cm away from the target. The rutile phase was obtained by implantation/diffusion on targets at about 700 °C. The plasma was developed from a 4:1 argon/oxygen mixture for ~5 hour processing periods. The target temperature was controlled by means of the bias voltage and the plasma source power. The obtained anatase phases did not require annealing after the plasma oxidation process. The characterization of the film samples was conducted by means of x-ray diffraction, scanning electron microscopy, x-ray photoelectron spectroscopy and Raman spectroscopy.

  3. Temperature equilibration in strongly coupled plasma

    SciTech Connect

    Thode, L. E.; Chang, C. H.; Snell, C. M.; Daughton, W. S.; Csanak, G. Y.

    2002-01-01

    A laser-driven experiment investigating electron-ion equilibration in strongly coupled plasma was performed in 1995. At that time, standard estimates for the electron-ion equilibration time were two-to-three orders of magnitude faster than observed experimentally. As a result, the electron-ion equilibration time was taken as a fitting parameter to understand the experimental results. Based upon guidance from nonequilibrium molecular dynamics mixture calculations 121 and comparison with strongly coupled resistivity experiments, we have developed a consistent binary collision model to understand the electron-ion equilibration experiment. The model has been implemented in a newly developed multi-species, multi-temperature physics code, which was used for simulation of the experiment. The resulting electron-ion exchange rate is close to the experiment, which is about three orders-of-magnitude slower than given by standard estimates, most of which is the result of a modified coulomb logarithm.

  4. Monte Carlo Simulation of Electron Swarm Parameters in the SF6/CF4 Gas Mixtures

    NASA Astrophysics Data System (ADS)

    Liu, Xueli; Xiao, Dengming

    2007-04-01

    We use a binary gas mixture Monte Carlo simulation model to calculate the electron transport parameters in SF6/CF4 mixtures in uniform electric fields. Electron collision cross section sets are assembled on the basis of the critical survey of Christophorou et al. [J. Phys. Chem. Ref. Data 25 (1996) 1341] for CF4 and Itoh et al. [J. Phys. D 21 (1988) 922] for SF6. The electron swarm parameters studied here are electron drift velocity, effective ionization coefficient and the ratio of longitudinal diffusion coefficient to mobility for the density-reduced electric field strength (E/N) in the range of 140≤ E/N≤ 600 Td (1 Td = 10-17 V cm2); the SF6 contents in the gas mixtures are 0, 20, 50, and 100%. The differences between the present calculated and measured values of Urquijo et al. [J. Phys. D 36 (2003) 3132] do not exceed the overall measured uncertainties for the parameters. To our knowledge, only Urquijo et al. [J. Phys. D 36 (2003) 3132] have measured the electron swarm parameters in SF6/CF4 gas mixtures by a pulsed Townsend technique; however, simulation results have scarcely been reported.

  5. Hypersonic lateral and directional stability characteristics of aeroassist flight experiment configuration in air and CF4

    NASA Technical Reports Server (NTRS)

    Micol, John R.; Wells, William L.

    1993-01-01

    Hypersonic lateral and directional stability characteristics measured on a 60 deg half-angle elliptical cone, which was raked at an angle of 73 deg from the cone centerline and with an ellipsoid nose (ellipticity equal to 2.0 in the symmetry plane), are presented for angles of attack from -10 to 10 deg. The high normal-shock density ratio of a real gas was simulated by tests at a Mach number of 6 in air and CF4 (density ratio equal to 5.25 and 12.0, respectively). Tests were conducted in air at Mach 6 and 10 and in CF4 at Mach 6 to examine the effects of Mach number, Reynolds number, and normal-shock density ratio. Changes in Mach number from 6 to 10 in air or in Reynolds number by a factor of 4 at Mach 6 had a negligible effect on lateral and directional stability characteristics. Variations in normal-shock density ratio had a measurable effect on lateral and directional aerodynamic coefficients, but no significant effect on lateral and directional stability characteristics. Tests in air and CF4 indicated that the configuration was laterally and directionally stable through the test range of angle of attack.

  6. Laser Plasma Coupling for High Temperature Hohlraums

    SciTech Connect

    Kruer, W.

    1999-11-04

    Simple scaling models indicate that quite high radiation temperatures can be achieved in hohlraums driven with the National Ignition Facility. A scaling estimate for the radiation temperature versus pulse duration for different size NIF hohlraums is shown in Figure 1. Note that a radiation temperature of about 650 ev is projected for a so-called scale 1 hohlraum (length 2.6mm, diameter 1.6mm). With such high temperature hohlraums, for example, opacity experiments could be carried out using more relevant high Z materials rather than low Z surrogates. These projections of high temperature hohlraums are uncertain, since the scaling model does not allow for the very strongly-driven laser plasma coupling physics. Lasnex calculations have been carried out to estimate the plasma and irradiation conditions in a scale 1 hohlraum driven by NIF. Linear instability gains as high as exp(100) have been found for stimulated Brillouin scattering, and other laser-driven instabilities are also far above their thresholds. More understanding of the very strongly-driven coupling physics is clearly needed in order to more realistically assess and improve the prospects for high temperature hohlraums. Not surprisingly, this regime has been avoided for inertial fusion applications and so is relatively unexplored.

  7. Electrical Coupling Efficiency of Inductive Plasma Accelerators

    NASA Technical Reports Server (NTRS)

    Martin, Adam K.; Eskridge, Richard H.

    2005-01-01

    A single-stage pulsed inductive plasma accelerator is modeled as an inductive mass-driver. The plasma is treated as a rigid slug, which acts as the armature. The system is a transformer, with the drive coil serving as the primary and the slug as the secondary. We derive a set of coupled dynamic-circuit equations, which depend on five dimensionless coefficients, and on the functional form of the mutual inductance profile, M (z). For a given coil geometry, M (z) was determined experimentally and compared to the results of calculations carried out with QuickField. The equations are solved with various coefficient values, in order to determine the conditions that yield high efficiencies. It was found that the coupling efficiency can be quite high and likely scales with power, although this does not preclude operation at lower power with acceptable efficiency. The effect of an imbedded magnetic bias flux, as for the case of a plasmoid thruster, was also included in the calculations.

  8. Instabilities in a capacitively coupled oxygen plasma

    SciTech Connect

    Küllig, C. Wegner, Th. Meichsner, J.

    2015-04-15

    Periodic fluctuations in the frequency range from 0.3 to 3 kHz were experimentally investigated in capacitively coupled radio frequency (13.56 MHz) oxygen plasma. The Gaussian beam microwave interferometry directly provides the line integrated electron density fluctuations. A system of two Langmuir probes measured the floating potential spatially (axial, radial) and temporally resolved. Hence, the floating potential fluctuation development is mapped within the discharge volume and provides a kind of discharge breathing and no wave propagation. Finally, it was measured the optical emission pattern of atomic oxygen during the fluctuation as well as the RF phase resolved optical emission intensity at selected phase position of the fluctuation by an intensified charge-coupled device camera. The deduced excitation rate pattern reveals the RF sheath dynamics and electron heating mechanisms, which is changing between low and high electronegativity during a fluctuation cycle. A perturbation calculation was taken into account using a global model with 15 elementary collision processes in the balance equations for the charged plasma species (O{sub 2}{sup +}, e, O{sup −}, O{sub 2}{sup −}) and a harmonic perturbation. The calculated frequencies agree with the experimentally observed frequencies. Whereby, the electron attachment/detachment processes are important for the generation of this instability.

  9. Instabilities in a capacitively coupled oxygen plasma

    NASA Astrophysics Data System (ADS)

    Küllig, C.; Wegner, Th.; Meichsner, J.

    2015-04-01

    Periodic fluctuations in the frequency range from 0.3 to 3 kHz were experimentally investigated in capacitively coupled radio frequency (13.56 MHz) oxygen plasma. The Gaussian beam microwave interferometry directly provides the line integrated electron density fluctuations. A system of two Langmuir probes measured the floating potential spatially (axial, radial) and temporally resolved. Hence, the floating potential fluctuation development is mapped within the discharge volume and provides a kind of discharge breathing and no wave propagation. Finally, it was measured the optical emission pattern of atomic oxygen during the fluctuation as well as the RF phase resolved optical emission intensity at selected phase position of the fluctuation by an intensified charge-coupled device camera. The deduced excitation rate pattern reveals the RF sheath dynamics and electron heating mechanisms, which is changing between low and high electronegativity during a fluctuation cycle. A perturbation calculation was taken into account using a global model with 15 elementary collision processes in the balance equations for the charged plasma species ( O2+, e , O-, O2- ) and a harmonic perturbation. The calculated frequencies agree with the experimentally observed frequencies. Whereby, the electron attachment/detachment processes are important for the generation of this instability.

  10. Tailored Voltage Waveform Capacitively-Coupled Plasmas

    NASA Astrophysics Data System (ADS)

    Booth, Jean-Paul; Lafleur, Trevor; Delattre, Pierre-Alexandre; Johnson, Erik

    2012-10-01

    A major limitation of large-area capacitively-coupled plasmas for materials processing is the inability to increase plasma density without increasing ion bombardment energy. Heil et al. (J. Phys. D 41. 165202, (2008)) demonstrated that for a driving voltage comprising one frequency, f, and it's harmonic 2f, the symmetry of the sheaths can be broken (the Electrical Asymmetry Effect, EAE). We have investigated large-area plasmas (50cm dia) in Ar driven by arbitrary voltage waveforms. Specifically we studied waveforms comprising sharp positive pulses (10-20ns wide, 15MHz repetition frequency). The voltage waveform was measured by an HV probe close to the powered electrode edge, the electron density was measured with a microwave hairpin resonator, the ion flux was measured by an array of planar ion flux probes in the grounded counter-electrode, and the power absorbed was determined from the current and voltage waveforms measured by a derivative probe. As well as the expected EAE observed in the electrode self-bias, we were able to demonstrate a dramatic increase in electron density (and concomitant increased power absorption) with reduced pulse-width at constant amplitude, in qualitative agreement with recent PIC simulations (Lafleur et al, APL 100, 194101(2012)).

  11. Experimental Observation and Computational Analysis of Striations in Electronegative Capacitively Coupled Radio-Frequency Plasmas

    NASA Astrophysics Data System (ADS)

    Liu, Yong-Xin; Schüngel, Edmund; Korolov, Ihor; Donkó, Zoltán; Wang, You-Nian; Schulze, Julian

    2016-06-01

    Self-organized spatial structures in the light emission from the ion-ion capacitive rf plasma of a strongly electronegative gas (CF4 ) are observed experimentally for the first time. Their formation is analyzed and understood based on particle-based kinetic simulations. These "striations" are found to be generated by the resonance between the driving radio frequency and the eigenfrequency of the ion-ion plasma (derived from an analytical model) that establishes a modulation of the electric field, the ion densities, as well as the energy gain and loss processes of electrons in the plasma. The growth of the instability is followed by the numerical simulations.

  12. Method of processing materials using an inductively coupled plasma

    DOEpatents

    Hull, Donald E.; Bieniewski, Thomas M.

    1990-01-01

    A method for making fine power using an inductively coupled plasma. The method provides a gas-free environment, since the plasma is formed without using a gas. The starting material used in the method is in solid form.

  13. Laser Ablation Inductively Coupled Plasma Mass Spectrometry

    PubMed Central

    Hutchinson, Robert W.; McLachlin, Katherine M.; Riquelme, Paloma; Haarer, Jan; Broichhausen, Christiane; Ritter, Uwe; Geissler, Edward K.; Hutchinson, James A.

    2015-01-01

    ABSTRACT New analytical techniques for multiparametric characterisation of individual cells are likely to reveal important information about the heterogeneity of immunological responses at the single-cell level. In this proof-of-principle study, laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) was applied to the problem of concurrently detecting 24 lineage and activation markers expressed by human leucocytes. This approach was sufficiently sensitive and specific to identify subpopulations of isolated T, B, and natural killer cells. Leucocyte subsets were also accurately detected within unfractionated peripheral blood mononuclear cells preparations. Accordingly, we judge LA-ICP-MS to be a suitable method for assessing expression of multiple tissue antigens in solid-phase biological specimens, such as tissue sections, cytospins, or cells grown on slides. These results augur well for future development of LA-ICP-MS–based bioimaging instruments for general users. PMID:27500232

  14. Intelligent autonomous inductively coupled plasma instrumental operation

    NASA Astrophysics Data System (ADS)

    Webb, Douglas P.

    The development of a framework for the automated analysis of inductively couple plasma atomic emission spectroscopy is present. Some of the research that lead to current state of this framework is presented. A small expert system that uses information about the current sample to generate a line search strategy which minimizes the number of emission lines which need to be measured, and avoids spectral overlaps when possible. A program is presented that evaluates the minimum number of spectral windows required to perform elemental analysis by ICP- AES, given a certain spectral window width. A method with the potential for rapidly ascertaining the physical properties of the sample matrix is presented. This system has the potential to help reduce sample introduction related system failures. Finally, three optimization algorithms are compared in their ability to optimize ICP- AES performance, from this an optimization module was developed for inclusion in the automated analysis framework.

  15. Modeling of dual frequency capacitively coupled plasma sources utilizing a full-wave Maxwell solver: II. Scaling with pressure, power and electronegativity

    NASA Astrophysics Data System (ADS)

    Yang, Yang; Kushner, Mark J.

    2010-10-01

    The trend in dielectric etching in microelectronics fabrication with capacitively coupled plasmas is the use of multiple frequencies where a high frequency (HF, tens to hundreds of MHz) dominates ionization and a low frequency (LF, a few to tens MHz) is used to control ion energy distributions to the wafer. Process parameters, such as pressure, gas mixture and LF and HF power deposition, are important to determining the uniformity of the plasma and properties of ions incident on the wafer. In this paper, we report on a computational investigation of the consequences of these parameters on uniformity and ion energy distributions to the wafer in a dual frequency capacitively coupled plasma reactor sustained in Ar/CF4 gas mixtures. Due to the coupling of finite wavelength, electromagnetic skin, electrostatic edge and electronegative effects, there are no simple scaling laws for plasma uniformity. The plasma uniformity is ultimately a function of conductivity and energy relaxation distance of electrons accelerated by electric fields in and near the sheath. There is a strong second-order effect on uniformity due to feedback from the electron energy distributions (EEDs) to ionization sources. The trends from our parametric study are correlated with the spatial variation of the HF electric field, to the total power deposition and to the spatial variation of EEDs and ionization sources.

  16. Stochastic properties of strongly coupled plasmas.

    PubMed

    Morozov, I V; Norman, G E; Valuev, A A

    2001-03-01

    Stochastic properties of equilibrium strongly coupled plasmas are investigated by a molecular dynamics method. The Krylov-Kolmogorov entropy K and the dynamical memory time t(m) are calculated both for electrons and ions with mass ratios 10-10(5). Two values of K entropy for ions are discovered corresponding to electron and ion time scales. The dependence of the K entropy on the number of particles, the nonideality parameter, and the form of the interaction potential is investigated. The problem of the accuracy of molecular dynamics simulations is discussed. A universal relation between Kt(m) and the fluctuation of the total energy of the system is obtained. The relation does not depend on the numerical integration scheme, temperature, density, and the interparticle interaction potential, so that it may be applied to arbitrary dynamic systems. Transition from dynamic to stochastic correlation is treated for both electron and ion velocity autocorrelation functions, for Langmuir and ion-sound plasma wave dynamic structure factors. We point to quantum uncertainty as a physical reason which limits dynamic (Newton) correlation for times greater than t(m). PMID:11308773

  17. Identification of the V3 vibration-rotation band of CF4 in balloon-borne infrared solar spectra

    NASA Technical Reports Server (NTRS)

    Goldman, A.; Murcray, D. G.; Murcray, F. J.; Cook, G. R.; Van Allen, J. W.; Bonomo, F. S.; Blatherwick, R. D.

    1979-01-01

    Infrared solar spectra in the 850 to 1350/cm region, at 0.02/cm resolution, were obtained during a balloon flight made on 27 October 1978 from Alamogordo, New Mexico. Analysis of the 1275-1290/cm region indicates that the atmospheric absorption lines of CH4, N2O, H2O, HNO3 and CO2 near 1283/cm are super-imposed on a broader absorption feature which we interpret as due to the V3 band of CF4. Fine structure of CF4 is also identified. Preliminary estimates from the sunset spectra show approximately 75 pptv CF4 near 25 km.

  18. Measuring nanopore size from the spin-lattice relaxation of CF4 gas

    PubMed Central

    Kuethe, Dean O.; Montaño, Rebecca; Pietraß, Tanja

    2007-01-01

    The NMR 19F spin-lattice relaxation time constant T1 for CF4 gas is dominated by spin–rotation interaction, which is mediated by the molecular collision frequency. When confined to pores of approximately the same size or smaller than the bulk gas mean free path, additional collisions of molecules with the pore walls should substantially change T1. To develop a method for measuring the surface/volume ratio S/V by measuring how T1 changes with confinement, we prepared samples of known S/V from fumed silica of known mass-specific surface area and compressed to varying degrees into cylinders of known volume. We then measured T1 for CF4 in these samples at varying pressures, and developed mathematical models for the change in T1 to fit the data. Even though CF4 has a critical temperature below room temperature, we found that its density in pores was greater than that of the bulk gas and that it was necessary to take this absorption into account. We modeled adsorption in two ways, by assuming that the gas condenses on the pore walls, and by assuming that gas in a region near the wall is denser than the bulk gas because of a simplified attractive potential. Both models suggested the same two-parameter formula, to which we added a third parameter to successfully fit the data and thus achieved a rapid, precise way to measure S/V from the increase in T1 due to confinement in pores. PMID:17400493

  19. Thermophysical properties of CF4/O2 and SF6/O2 gas mixtures

    NASA Astrophysics Data System (ADS)

    Damyanova, M.; Hohm, U.; Balabanova, E.; Barton, D.

    2016-03-01

    Fitting formulae are presented for the calculation of the second interaction virial coefficients, mixture viscosities and binary diffusion coefficients for CF4/O2 and SF6/O2 gas mixtures in the temperature range between 200 K and 1000 K. The data recommended are obtained from the isotropic (n-6) Lennard-Jones intermolecular interaction potentials of the pure substances by using the Hohm-Zarkova-Damyanova mixing rules. In general, a good agreement is observed between our results and the experimental and theoretical data found in the literature.

  20. Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects

    NASA Astrophysics Data System (ADS)

    Schüngel, E.; Korolov, I.; Bruneau, B.; Derzsi, A.; Johnson, E.; O’Connell, D.; Gans, T.; Booth, J.-P.; Donkó, Z.; Schulze, J.

    2016-07-01

    Capacitively coupled radio frequency plasmas operated in an electronegative gas (CF4) and driven by voltage waveforms composed of four consecutive harmonics are investigated for different fundamental driving frequencies using PIC/MCC simulations and an analytical model. As has been observed previously for electropositive gases, the application of peak-shaped waveforms (that are characterized by a strong amplitude asymmetry) results in the development of a DC self-bias due to the electrical asymmetry effect (EAE), which increases the energy of ions arriving at the powered electrode. In contrast to the electropositive case (Korolov et al 2012 J. Phys. D: Appl. Phys. 45 465202) the absolute value of the DC self-bias is found to increase as the fundamental frequency is reduced in this electronegative discharge, providing an increased range over which the DC self-bias can be controlled. The analytical model reveals that this increased DC self-bias is caused by changes in the spatial profile and the mean value of the net charge density in the grounded electrode sheath. The spatio-temporally resolved simulation data show that as the frequency is reduced the grounded electrode sheath region becomes electronegative. The presence of negative ions in this sheath leads to very different dynamics of the power absorption of electrons, which in turn enhances the local electronegativity and plasma density via ionization and attachment processes. The ion flux to the grounded electrode (where the ion energy is lowest) can be up to twice that to the powered electrode. At the same time, while the mean ion energies at both electrodes are quite different, their ratio remains approximately constant for all base frequencies studied here.

  1. Irregularities in electronegative plasmas due to ion-ion coupling

    SciTech Connect

    Vitello, P.

    1999-07-01

    In partially ionized electronegative plasmas at low neutral pressure and high plasma density, coupling between positive and negative ions through space charge effects and through Coulomb scattering can lead to turbulence and irregularities in the ion density and flux. In this regime, the force on ions due to ion-ion coulomb scattering may dominate that from ion scattering with neutrals. This can lead to the formation of a, possibly turbulent, negative ion boundary layer containing the bulk of the negative ions. Commercial inductively Coupled Plasmas reactors used in the semiconductor industry typically operate at low pressure and high plasma density. Simulations are presented for a Chlorine discharge in the GEC reactor modified for Inductively Coupled operation. Results show that ion-ion coupling can induce large variations in the plasma density, and that accurate modeling of spatial plasma structure should include these effects.

  2. Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4

    NASA Astrophysics Data System (ADS)

    Brandt, S.; Berger, B.; Schüngel, E.; Korolov, I.; Derzsi, A.; Bruneau, B.; Johnson, E.; Lafleur, T.; O’Connell, D.; Koepke, M.; Gans, T.; Booth, J.-P.; Donkó, Z.; Schulze, J.

    2016-08-01

    The power absorption dynamics of electrons and the electrical asymmetry effect in capacitive radio-frequency plasmas operated in CF4 and driven by tailored voltage waveforms are investigated experimentally in combination with kinetic simulations. The driving voltage waveforms are generated as a superposition of multiple consecutive harmonics of the fundamental frequency of 13.56 MHz. Peaks/valleys and sawtooth waveforms are used to study the effects of amplitude and slope asymmetries of the driving voltage waveform on the electron dynamics and the generation of a DC self-bias in an electronegative plasma at different pressures. Compared to electropositive discharges, we observe strongly different effects and unique power absorption dynamics. At high pressures and high electronegativities, the discharge is found to operate in the drift-ambipolar (DA) heating mode. A dominant excitation/ionization maximum is observed during sheath collapse at the edge of the sheath which collapses fastest. High negative-ion densities are observed inside this sheath region, while electrons are confined for part of the RF period in a potential well formed by the ambipolar electric field at this sheath edge and the collapsed (floating potential) sheath at the electrode. For specific driving voltage waveforms, the plasma becomes divided spatially into two different halves of strongly different electronegativity. This asymmetry can be reversed electrically by inverting the driving waveform. For sawtooth waveforms, the discharge asymmetry and the sign of the DC self-bias are found to reverse as the pressure is increased, due to a transition of the electron heating mode from the α-mode to the DA-mode. These effects are interpreted with the aid of the simulation results.

  3. Coupled Langmuir oscillations in 2-dimensional quantum plasmas

    SciTech Connect

    Akbari-Moghanjoughi, M.

    2014-03-15

    In this work, we present a hydrodynamic model to study the coupled quantum electron plasma oscillations (QEPO) for two dimensional (2D) degenerate plasmas, which incorporates all the essential quantum ingredients such as the statistical degeneracy pressure, electron-exchange, and electron quantum diffraction effect. Effects of diverse physical aspects like the electronic band-dispersion effect, the electron exchange-correlations and the quantum Bohm-potential as well as other important plasma parameters such as the coupling parameter (plasma separation) and the plasma electron number-densities on the linear response of the coupled system are investigated. By studying three different 2D plasma coupling types, namely, graphene-graphene, graphene-metalfilm, and metalfilm-metalfilm coupling configurations, it is remarked that the collective quantum effects can influence the coupled modes quite differently, depending on the type of the plasma configuration. It is also found that the slow and fast QEPO frequency modes respond very differently to the change in plasma parameters. Current findings can help in understanding of the coupled density oscillations in multilayer graphene, graphene-based heterojunctions, or nanofabricated integrated circuits.

  4. Plasma sweeper to control the coupling of RF power to a magnetically confined plasma

    SciTech Connect

    Motley, R.W.; Glanz, J.

    1985-04-16

    A device for coupling RF power (a plasma sweeper) from a phased waveguide array for introducing RF power to a plasma having a magnetic field associated therewith comprises at least one electrode positioned near the plasma and near the phased waveguide array; and a potential source coupled to the electrode for generating a static electric field at the electrode directed into the plasma and having a component substantially perpendicular to the plasma magnetic field such that a non-zero vector cross-product of the electric and magnetic fields exerts a force on the plasma causing the plasma to drift.

  5. Plasma sweeper to control the coupling of RF power to a magnetically confined plasma

    DOEpatents

    Motley, Robert W.; Glanz, James

    1985-01-01

    A device for coupling RF power (a plasma sweeper) from a phased waveguide array for introducing RF power to a plasma having a magnetic field associated therewith comprises at least one electrode positioned near the plasma and near the phased waveguide array; and a potential source coupled to the electrode for generating a static electric field at the electrode directed into the plasma and having a component substantially perpendicular to the plasma magnetic field such that a non-zero vector cross-product of the electric and magnetic fields exerts a force on the plasma causing the plasma to drift.

  6. Shear viscosities of photons in strongly coupled plasmas

    NASA Astrophysics Data System (ADS)

    Yang, Di-Lun; Müller, Berndt

    2016-09-01

    We investigate the shear viscosity of thermalized photons in the quark gluon plasma (QGP) at weak coupling and N = 4 super Yang-Mills plasma (SYMP) at both strong and weak couplings. We find that the shear viscosity due to the photon-parton scattering up to the leading order of electromagnetic coupling is suppressed when the coupling of the QGP/SYMP is increased, which stems from the blue-shift of the thermal-photon spectrum at strong coupling. In addition, the shear viscosity rapidly increases near the deconfinement transition in a phenomenological model analogous to the QGP.

  7. Synchronization between two coupled direct current glow discharge plasma sources

    SciTech Connect

    Chaubey, Neeraj; Mukherjee, S.; Sen, A.; Sekar Iyengar, A. N.

    2015-02-15

    Experimental results on the nonlinear dynamics of two coupled glow discharge plasma sources are presented. A variety of nonlinear phenomena including frequency synchronization and frequency pulling are observed as the coupling strength is varied. Numerical solutions of a model representation of the experiment consisting of two coupled asymmetric Van der Pol type equations are found to be in good agreement with the observed results.

  8. Mode-coupling instability of monolayer complex (dusty) plasmas

    NASA Astrophysics Data System (ADS)

    Zhdanov, Sergey; Ivlev, Alexei; Morfill, Gregor

    2010-05-01

    Strongly coupled complex (dusty) plasmas give us a unique opportunity to go beyond the limits of continuous media and study various generic processes occurring in liquids or solids, in regimes ranging from the onset of cooperative phenomena to large strongly coupled systems at the most detailed kinetic (atomistic) level. On the other hand, there is certain peculiarity of the interparticle interactions in complex plasmas. This can be easily understood if we divide the complete set of elementary charges in complex plasmas into two distinct categories - a subsystem of charges bound to the microparticles, and a subsystem of free plasma charges in the surrounding wakes. Plasma wakes play the role of a "third body" in the mutual particle-particle interaction and, hence, make the pair interaction nonreciprocal. We carried out rigorous theoretical investigation of the DL wave mode coupling occurring in 2D complex plasmas due to particle-wake interactions. The analysis of the mode coupling shows that if the strength of the vertical confinement is below a certain critical value, then resonance coupling between the longitudinal in-plane mode and out-of-plane mode sets in. This results in the emergence of a hybrid mode and drives the mode-coupling instability. The universal dependence of the critical confinement frequency on plasma parameters is calculated, which allows us to specify the conditions when stable 2D highly ordered complex plasma can be formed in experiments.

  9. Avr4 promotes Cf-4 receptor-like protein association with the BAK1/SERK3 receptor-like kinase to initiate receptor endocytosis and plant immunity.

    PubMed

    Postma, Jelle; Liebrand, Thomas W H; Bi, Guozhi; Evrard, Alexandre; Bye, Ruby R; Mbengue, Malick; Kuhn, Hannah; Joosten, Matthieu H A J; Robatzek, Silke

    2016-04-01

    The first layer of plant immunity is activated by cell surface receptor-like kinases (RLKs) and proteins (RLPs) that detect infectious pathogens. Constitutive interaction with the SUPPRESSOR OF BIR1 (SOBIR1) RLK contributes to RLP stability and kinase activity. As RLK activation requires transphosphorylation with a second associated RLK, it remains elusive how RLPs initiate downstream signaling. We employed live-cell imaging, gene silencing and coimmunoprecipitation to investigate the requirement of associated kinases for functioning and ligand-induced subcellular trafficking of Cf RLPs that mediate immunity of tomato against Cladosporium fulvum. Our research shows that after elicitation with matching effector ligands Avr4 and Avr9, BRI1-ASSOCIATED KINASE 1/SOMATIC EMBRYOGENESIS RECEPTOR KINASE 3 (BAK1/SERK3) associates with Cf-4 and Cf-9. BAK1/SERK3 is required for the effector-triggered hypersensitive response and resistance of tomato against C. fulvum. Furthermore, Cf-4 interacts with SOBIR1 at the plasma membrane and is recruited to late endosomes upon Avr4 trigger, also depending on BAK1/SERK3. These observations indicate that RLP-mediated resistance and endocytosis require ligand-induced recruitment of BAK1/SERK3, reminiscent of BAK1/SERK3 interaction and subcellular fate of the FLAGELLIN SENSING 2 (FLS2) RLK. This reveals that diverse classes of cell surface immune receptors share common requirements for initiation of resistance and endocytosis. PMID:26765243

  10. EVALUATION OF AN INDUCTIVELY COUPLED PLASMA, MULTICHANNEL SPECTROMETRIC ANALYSIS SYSTEM

    EPA Science Inventory

    An inductively coupled plasma, multielement atomic emission spectrometric analysis system has been evaluated with respect to the Environmental Protection Agency's need for a rapid method for determination of trace elemental concentrations in water. Data are presented on detection...

  11. Inductively coupled plasma etching of GaN

    SciTech Connect

    Shul, R.J.; McClellan, G.B.; Casalnuovo, S.A.; Rieger, D.J.; Pearton, S.J.; Constantine, C.; Barratt, C.; Karlicek, R.F. Jr.; Tran, C.; Schurman, M.

    1996-08-01

    Inductively coupled plasma (ICP) etch rates for GaN are reported as a function of plasma pressure, plasma chemistry, rf power, and ICP power. Using a Cl{sub 2}/H{sub 2}/Ar plasma chemistry, GaN etch rates as high as 6875 A/min are reported. The GaN surface morphology remains smooth over a wide range of plasma conditions as quantified using atomic force microscopy. Several etch conditions yield highly anisotropic profiles with smooth sidewalls. These results have direct application to the fabrication of group-III nitride etched laser facets. {copyright} {ital 1996 American Institute of Physics.}

  12. Visco-elastic effects in strongly coupled dusty plasmas

    SciTech Connect

    Bandyopadhyay, P.; Prasad, G.; Sen, A.; Kaw, P. K.

    2008-09-07

    We report on experimental evidence of visco-elastic effects in a strongly coupled dusty plasma through investigations of the propagation characteristics of low frequency dust acoustic waves and by excitations of transverse shear waves in a DC discharge Argon plasma.

  13. Method of processing materials using an inductively coupled plasma

    DOEpatents

    Hull, Donald E.; Bieniewski, Thomas M.

    1989-01-01

    A method for coating surfaces or implanting ions in an object using an inductively coupled plasma. The method provides a gas-free environment, since the plasma is formed without using a gas. The coating material or implantation material is intitially in solid form.

  14. Ion-wave stabilization of an inductively coupled plasma

    SciTech Connect

    Camparo, J.C.; Mackay, R.

    2006-04-24

    Stabilization of the rf power driving an inductively coupled plasma (ICP) has implications for fields ranging from atomic clocks to analytical chemistry to illumination technology. Here, we demonstrate a technique in which the plasma itself acts as a probe of radio wave power, and provides a correction signal for active rf-power control. Our technique takes advantage of the resonant nature of forced ion waves in the plasma, and their observation in the ICP's optical emission.

  15. Energy coupling to the plasma in repetitive nanosecond pulse discharges

    SciTech Connect

    Adamovich, Igor V.; Nishihara, Munetake; Choi, Inchul; Uddi, Mruthunjaya; Lempert, Walter R.

    2009-11-15

    A new analytic quasi-one-dimensional model of energy coupling to nanosecond pulse discharge plasmas in plane-to-plane geometry has been developed. The use of a one-dimensional approach is based on images of repetitively pulsed nanosecond discharge plasmas in dry air demonstrating that the plasma remains diffuse and uniform on a nanosecond time scale over a wide range of pressures. The model provides analytic expressions for the time-dependent electric field and electron density in the plasma, electric field in the sheath, sheath boundary location, and coupled pulse energy. The analytic model predictions are in very good agreement with numerical calculations. The model demonstrates that (i) the energy coupled to the plasma during an individual nanosecond discharge pulse is controlled primarily by the capacitance of the dielectric layers and by the breakdown voltage and (ii) the pulse energy coupled to the plasma during a burst of nanosecond pulses decreases as a function of the pulse number in the burst. This occurs primarily because of plasma temperature rise and resultant reduction in breakdown voltage, such that the coupled pulse energy varies approximately proportionally to the number density. Analytic expression for coupled pulse energy scaling has been incorporated into the air plasma chemistry model, validated previously by comparing with atomic oxygen number density measurements in nanosecond pulse discharges. The results of kinetic modeling using the modified air plasma chemistry model are compared with time-resolved temperature measurements in a repetitively pulsed nanosecond discharge in air, by emission spectroscopy, and purely rotational coherent anti-Stokes Raman spectroscopy showing good agreement.

  16. Energy coupling to the plasma in repetitive nanosecond pulse discharges

    NASA Astrophysics Data System (ADS)

    Adamovich, Igor V.; Nishihara, Munetake; Choi, Inchul; Uddi, Mruthunjaya; Lempert, Walter R.

    2009-11-01

    A new analytic quasi-one-dimensional model of energy coupling to nanosecond pulse discharge plasmas in plane-to-plane geometry has been developed. The use of a one-dimensional approach is based on images of repetitively pulsed nanosecond discharge plasmas in dry air demonstrating that the plasma remains diffuse and uniform on a nanosecond time scale over a wide range of pressures. The model provides analytic expressions for the time-dependent electric field and electron density in the plasma, electric field in the sheath, sheath boundary location, and coupled pulse energy. The analytic model predictions are in very good agreement with numerical calculations. The model demonstrates that (i) the energy coupled to the plasma during an individual nanosecond discharge pulse is controlled primarily by the capacitance of the dielectric layers and by the breakdown voltage and (ii) the pulse energy coupled to the plasma during a burst of nanosecond pulses decreases as a function of the pulse number in the burst. This occurs primarily because of plasma temperature rise and resultant reduction in breakdown voltage, such that the coupled pulse energy varies approximately proportionally to the number density. Analytic expression for coupled pulse energy scaling has been incorporated into the air plasma chemistry model, validated previously by comparing with atomic oxygen number density measurements in nanosecond pulse discharges. The results of kinetic modeling using the modified air plasma chemistry model are compared with time-resolved temperature measurements in a repetitively pulsed nanosecond discharge in air, by emission spectroscopy, and purely rotational coherent anti-Stokes Raman spectroscopy showing good agreement.

  17. Local fields in strongly coupled plasmas

    SciTech Connect

    Pollock, E.L.; Weisheit, J.C.

    1984-06-01

    Computer simulation techniques and important static properties of plasma microfields are discussed. The relevant timescales are introduced for dynamical atomic problems, and some time-dependent properties of microfields are discussed. In the last two sections of the paper these results are applied to two problems relevant to the spectroscopy of dense plasmas: (1) broadening of spectral lines, and (2) screening in inelastic electron-ion collisions.

  18. Relative dissociation fractions of CF4 under 15–30 keV H‑, C‑ and O‑ negative ion impact

    NASA Astrophysics Data System (ADS)

    Wang, Dedong; Fan, Yikui; Zhao, Zilong; Min, Guangxin; Zhang, Xuemei

    2016-08-01

    The relative dissociation fractions to produce the fragments of CF4 molecule are studied under the impact of 15 keV to 30 keV H‑, C‑ and O‑ negative ions. By using a time-of-flight mass spectrometer, the recoil ions and ion pairs originating from the target molecule CF4 are detected and identified in coincidence with scattered ions in q = 0 and q = +1 charge states. The fractions for the production of the fragment ions are obtained relative to the {\\text{CF} }3+ yield, while that of the ion pairs relative to the (C+, F+) coincidence yield.

  19. Magnetic field-aligned coupling effects on ionospheric plasma structure

    NASA Technical Reports Server (NTRS)

    Heelis, R. A.; Vickrey, J. F.

    1990-01-01

    This paper presents a mathematical description of the electrical coupling and dynamics of plasma structure in the E and F regions. The scale size dependence of the electric field coupling along the magnetic field is examined for a realistic background ionosphere and atmosphere. It is shown that, while normalized potentials map reciprocally between two altitudes, the potential disturbance caused by a fixed amplitude plasma density perturbation does not. The magnitude of electrostatic potential created by structured ionization is also shown to be strongly dependent on the altitude of the structure. The role of diffusion parallel to the magnetic field in the redistribution and decay of plasma structure is illustrated.

  20. PFC Abatement in Capacitevely-Coupled Plasma Reactor

    NASA Astrophysics Data System (ADS)

    Porshnev, P. I.; Alaoui, M.; Diamant, Stela; Francis, Terry; Raoux, Sebastien; Woolston, Mike

    2001-10-01

    A low-pressure plasma reactor, was developed to reduce PFC emissions of dielectric etch tools, is a point-of-use environmentally and economically sound solution. Generally, local electric fields in capacitively-coupled (CC) plasmas are higher than in inductively-coupled (IC) plasmas. As a result, electron energy distributions in CC plasmas have more pronounced high-energy part compared to the ones in IC plasmas. This is particularly important for effective breaking of the strong C-F bonds, which dissociation potentials are observably higher than the average electron energy. CC plasma in the Pegasys (Plasma Exhaust Gas Abatement SYStem) reactor was found to be in so-called g-regime, in which ionization is provided with secondary emission electrons. Though in these plasmas, the majority of electrons still reside in plasma bulk, the most important discharge characteristics, in particular, the abatement efficiency, are determined by highly-energetic electrons from sheath zones. With water being added to the incoming gas mixture, better than 95% destruction removal efficiency of the PFCs has been achieved for all dielectric etch applications. CC plasma-based abatement significantly differs from existing abatement methods, especially combustion and catalytic oxidation, which are much less environmentally friendly and economically viable.

  1. Coupling modes in a dipolar microwave plasma source

    NASA Astrophysics Data System (ADS)

    Lacoste, Ana; Baele, Pierre; Maurau, Remy; Bechu, Stephane; Bes, Alexandre

    2015-09-01

    The multi-dipolar microwave plasma is a suitable technology for the scaling-up of high density plasma processing in the very low pressure range. Effectively, a large area or volume of plasma can be achieved by a mere distribution, over 2 or 3 dimensions, of a number of elementary plasma sources. To enhance the microwave coupling efficiency and optimize the spatial repartition of the elementary plasma sources, it could be helpful to localize the production regions and coupling modes that govern the energy transfer from the wave to the electrons. The main objective of this work is to identify the possible coupling modes as a function of operating parameters. Accordingly, the plasma parameters (electron temperature, density) were correlated together with the electromagnetic radiation, as well as with different coupling modes observed as a function of microwave power. High plasma densities, up to 10 times the critical density (for one source), can be achieved through an efficient transfer of the electrostatic wave energy to the electrons.

  2. Effect of collisions on the resonance vibrational polarizability of gaseous SF6 and CF4 molecules

    NASA Astrophysics Data System (ADS)

    Bulanin, M. O.; Burtsev, A. P.; Kislyakov, I. M.; Sveshnikov, Yu. M.

    2004-09-01

    The density dependences of the absorption cross sections and refractivity are experimentally studied for the SF6 and CF4 molecules in pure gases in the region of their ν3 infrared vibrational-rotational antisymmetric modes. The dispersions of the refractive index are determined for both compounds by the Kramers-Kronig transformation of the spectral data obtained, and, for the SF6 isotopomers, they are also measured by the method of two-color interferometry. Strong nonlinear dependences of optical parameters and their dispersions on the gas density are observed. The values of second optical virial coefficient B R (ν) obtained for pure SF6 are more than an order of magnitude greater than the values found earlier for mixtures of SF6 with buffer rare gases. The results of calculations of the second virial coefficients of the absorption cross section and refractivity in terms of the DID model of interacting dipoles are in agreement with the experimental data in the band wings. Correlations between the behavior of the spectral dependence of functions B R (ν) and the parameters of model intermolecular potentials used in the calculations are found.

  3. Experimental investigation on no-vent fill process using tetrafluoromethane (CF4)

    NASA Astrophysics Data System (ADS)

    Kim, Youngcheol; Lee, Cheonkyu; Park, Jiho; Seo, Mansu; Jeong, Sangkwon

    2016-03-01

    This paper investigates the transfer of liquid cryogens using a no-vent fill (NVF) process experimentally to identify the dominant NVF parameters. The experimental apparatus has been fabricated with extensive instrumentations to precisely study the effects of each NVF parameter. Liquid tetrafluoromethane (CF4) is selected as the working fluid due to its similar molecular structures and similar normal boiling point and triple point with liquid methane which has been considered as an attractive future cryogenic propellant. The experimental results show that the initial receiver tank wall temperature and the incoming liquid temperature are the primary factors that characterize the (non-equilibrium) thermodynamic state at the start of a NVF transfer. The supply pressure is also critical as it indicates the ability to condense vapor in the receiver tank. A non-dimensional map based on energy balance is proposed to find acceptable initial conditions of the filling volume at the desired final tank pressure. The non-dimensional map shows good agreement with the NVF data not only in this paper but also in the previous research.

  4. Solar terrestrial coupling through space plasma processes

    SciTech Connect

    Birn, J.

    2000-12-01

    This is the final report of a three-year, Laboratory-Directed Research and Development (LDRD) project at the Los Alamos National Laboratory (LANL). The project investigates plasma processes that govern the interaction between the solar wind, charged particles ejected from the sun, and the earth's magnetosphere, the region above the ionosphere governed by the terrestrial magnetic field. Primary regions of interest are the regions where different plasma populations interact with each other. These are regions of particularly dynamic plasma behavior, associated with magnetic flux and energy transfer and dynamic energy release. The investigations concerned charged particle transport and energization, and microscopic and macroscopic instabilities in the magnetosphere and adjacent regions. The approaches combined space data analysis with theory and computer simulations.

  5. Structural properties of lithium atom under weakly coupled plasma environment

    NASA Astrophysics Data System (ADS)

    Dutta, S.; Saha, J. K.; Chandra, R.; Mukherjee, T. K.

    2016-04-01

    The Rayleigh-Ritz variational technique with a Hylleraas basis set is being tested for the first time to estimate the structural modifications of a lithium atom embedded in a weakly coupled plasma environment. The Debye-Huckel potential is used to mimic the weakly coupled plasma environment. The wave functions for both the helium-like lithium ion and the lithium atom are expanded in the explicitly correlated Hylleraas type basis set which fully takes care of the electron-electron correlation effect. Due to the continuum lowering under plasma environment, the ionization potential of the system gradually decreases leading to the destabilization of the atom. The excited states destabilize at a lower value of the plasma density. The estimated ionization potential agrees fairly well with the few available theoretical estimates. The variation of one and two particle moments, dielectric susceptibility and magnetic shielding constant, with respect to plasma density is also been discussed in detail.

  6. Fluid-Plasma Coupling in Hydrogen Flames

    NASA Astrophysics Data System (ADS)

    Massa, Luca; Retter, Jonathan; Glumac, Nick; Elliot, Gregg; Freund, Jonathan

    2015-11-01

    Recent experiments show that hydrogen diffusion flames at low Reynolds number can be markedly affected by a dielectric barrier discharge (DBD) plasma. The flame surface deforms and flattens, and light emissions increase. We develop a simulation model to analyze the mechanisms that causes these changes, and apply it to numerical calculations of axisymmetric flames with co-annular DBD, matching the corresponding experiments. Body forces due to charge sheaths are found to be the main mechanism, with radicals produced by plasma excitation playing a secondary role for the present conditions. The non-actuated flame flickers at approximately 10 Hz, in good agreement with the experiments. As the DBD voltage is increased, the flame flattens and oscillations decrease, eventually ceasing above a threshold value. The fully flattened case has a stoichiometric surface lying flat across the fuel orifice, with flame temperature exceeding significantly the adiabatic flame value. A force based on a linearized plasma sheath model, calibrated against air experiments, reproduces the main features of the experiments and provides a good estimate for the threshold flattening potential. In faster flowing regimes, radical production by the plasma becomes more important.

  7. Coupling of axial plasma jets to compressional Alfven waves

    NASA Astrophysics Data System (ADS)

    Vincena, Stephen; Gekelman, Walter

    2009-11-01

    The coupling of mass, energy, and momentum from a localized, dense, and rapidly expanding plasma into a large-scale magnetized background plasma is central to understanding many physical processes; these include galactic jets, coronal mass ejections, tokamak pellet fueling, high-altitude nuclear detonations, chemical releases in the ionosphere, and supernovae. The large-scale magnetized plasmas are capable of supporting Alfv'en waves, which mediate the flow of currents and associated changes of magnetic topology on the largest size scales of the external system. We present initial results from a laboratory experiment wherein a fast-moving, laser-produced plasma (LPP) is allowed to propagate along the magnetic field lines of a pre-existing plasma column (17m long by 60 cm diameter). The LPP is generated using a 1J, 8ns Nd:YAG laser fired at a graphite target. The laser is pulsed along with the background plasma at 1Hz. This work focuses on the coupling of the LPP to compressional Alfv'en waves in the background plasma. The experiments are conducted at UCLA's Basic Plasma Science Facility in the Large Plasma Device.

  8. Study of the dielectric breakdown properties of hot SF6-CF4 mixtures at 0.01-1.6 MPa

    NASA Astrophysics Data System (ADS)

    Li, Xingwen; Zhao, Hu; Jia, Shenli; Murphy, Anthony B.

    2013-08-01

    The dielectric breakdown properties of SF6-CF4 mixtures were investigated at different ratios of SF6, 0.01-1.6 MPa, and gas temperatures up to 3000 K. Initially, the equilibrium compositions of SF6-CF4 mixtures were calculated by minimizing the Gibbs free energy under the assumptions of local thermodynamic and chemical equilibrium. Then the electron energy distribution function was obtained based on those data by solving the Boltzmann equation under the zero-dimensional two-term spherical harmonic approximation. Finally, the critical reduced electric field strength (E/N)cr of SF6-CF4 mixtures, which is defined as the value for which total ionization reaction is equal to total attachment reaction, were determined and analyzed. The results confirm the superior breakdown properties of pure SF6 at relatively low gas temperatures. However, for higher gas temperatures (i.e., T > 2200 K at 0.4 MPa), the (E/N)cr in SF6-CF4 mixtures are obviously higher than that in pure SF6 and the values of (E/N)cr increase with the reduction of the ratio of SF6.

  9. Measured and predicted shock shapes for AFE configuration at Mach 6 in air and in CF4

    NASA Technical Reports Server (NTRS)

    Wells, William L.; Franks, Alan M.

    1988-01-01

    Shock shapes and stand-off distances were obtained for the Aeroassist Flight Experiment configuration from Mach 6 tests in air and in CF4. Results were plotted for an angle-of attack range from -10 to 10 degrees and comparisons were made at selected angles with inviscid-flow predictions. Tests were performed in the Langley Research Center (LaRC) 20 inch Mach 6 Tunnel (air) at unit free-stream Reynolds numbers (N sub Re, infinity) of 2 million/ft and 0.6 million/ft and in the LaRC Hypersonic CF4 Tunnel at N sub Re, infinity = 0.5 million/ft and 0.3 million/ft. Within the range of these tests, N sub Re, infinity did not affect the shock shape or stand off distance, and the predictions were in good agreement with the measurements. The shock stand-off distance in CF4 was approximately half of that in air. This effect resulted from the differences in density ratio across the normal shock, which was approximately 12 in CF4 and 5 in air. In both test gases, the shock lay progressively closer to the body as angle of attack decreased.

  10. Stopping Power for Strong Beam-Plasma Coupling

    NASA Astrophysics Data System (ADS)

    Gericke, Dirk O.

    2001-10-01

    The slowing down process of charged particles in plasma targets is investigated for the case of strong beam-plasma coupling. Strong beam-plasma correlations can be considered using the collision operator of the quantum Boltzmann equation. As a first step, dynamic screening is included in the first Born approximation. This approach gives good results for moderate beam-plasma coupling (Zb Γ^3/2 < 0.2) but fails for strong coupling. In the latter regime, one has to include dynamic screening effects also in terms beyound the first Born approximation. This can be done approximately applying a velocity dependent screening length. A comparison with other models, e.g. the Bethe-formula, the standard model of the stopping power (Bethe plus Bloch corrections and Barkas terms), the Li & Petrasso formula and simulation data (MD and PIC), is given. This comparison clearly shows the advantage of the proposed model: it smoothly interpolates between the classical low velocity regime, where strong coupling effects occur, and the high velocity quantum regime, where collective modes are important. In the latter case, the experimentally proven Bethe-formula is obtained. Furthermore, it matches the simulation data for moderate as well as strong beam-plasma coupling.

  11. Dust acoustic instability in a strongly coupled dusty plasma

    NASA Astrophysics Data System (ADS)

    Rosenberg, M.; Kalman, G. J.; Hartmann, P.; Goree, J.

    2013-10-01

    Dusty plasmas are plasmas containing charged micron to sub-micron size dust grains (solid particulates). Because the grains can be multiply charged and are much more massive than the ions, the presence of dust can lead to novel waves such as the dust acoustic wave, which is a compressional wave that can be excited by a flow of ions that is driven by an electric field. Moreover, the large dust charge can result in strong Coulomb coupling between the dust grains, where the electrostatic energy between neighboring grains is larger than their thermal (kinetic) energy. When the coupling between dust grains is strong, but not large enough for crystallization, the dust is in the strongly coupled liquid phase. This poster theoretically investigates the dust acoustic instability, which is driven by sub-thermal ion flow, in a three-dimensional dusty plasma in the strongly coupled liquid phase. It is found that strong coupling enhances the instability. The application is to microgravity experiments with dusty plasma planned for the PK-4 and PlasmaLab instruments, which are in development for the International Space Station. Microgravity conditions enable the preparation of dust clouds under these sub-thermal ion flow conditions by avoiding the need for strong electric fields to levitate the dust grains.

  12. Linear coupling of acoustic and cyclotron waves in plasma flows

    SciTech Connect

    Rogava, Andria; Gogoberidze, Grigol

    2005-05-15

    It is found that in magnetized electrostatic plasma flows the velocity shear couples ion-acoustic waves with ion-cyclotron waves and leads, under favorable conditions, to their efficient reciprocal transformations. It is shown that in a two-dimensional setup this coupling has a remarkable feature: it is governed by equations that are mathematically equal to the ones describing coupling of sound waves with internal gravity waves [Rogava and Mahajan, Phys. Rev. E 55, 1185 (1997)] in neutral fluids. For flows with low shearing rates a fully analytic, quantitative description of the coupling efficiency, based on a noteworthy quantum-mechanical analogy, is given and transformation coefficients are calculated.

  13. Linear coupling of acoustic and cyclotron waves in plasma flows

    NASA Astrophysics Data System (ADS)

    Rogava, Andria; Gogoberidze, Grigol

    2005-05-01

    It is found that in magnetized electrostatic plasma flows the velocity shear couples ion-acoustic waves with ion-cyclotron waves and leads, under favorable conditions, to their efficient reciprocal transformations. It is shown that in a two-dimensional setup this coupling has a remarkable feature: it is governed by equations that are mathematically equal to the ones describing coupling of sound waves with internal gravity waves [Rogava and Mahajan, Phys. Rev. E 55, 1185 (1997)] in neutral fluids. For flows with low shearing rates a fully analytic, quantitative description of the coupling efficiency, based on a noteworthy quantum-mechanical analogy, is given and transformation coefficients are calculated.

  14. Emissions of Tetrafluoromethane (CF4) and Hexafluoroethane (C2F6) from East Asian Aluminum and Semiconductor Industries

    NASA Astrophysics Data System (ADS)

    Kim, J.; Li, S.; Muhle, J.; Fang, X.; Manning, A. J.; Arnold, T.; Park, S.; Park, M.; Saito, T.; Yokouchi, Y.; Stohl, A.; Weiss, R. F.; Kim, K.

    2013-12-01

    Tetrafluoromethane (CF4) and Hexafluoroethane (C2F6) are among the most potent greenhouse gases (GHGs), with atmospheric lifetimes of 50,000 and 10,000 years and 100-year Global Warming Potentials of 7,490 and 12,200, respectively. The Chinese aluminum smelting (AL) industry, accounting for 39% of the global aluminum production in 2010, has become a significant emitter of these compounds to the atmosphere, . The AL industry has estimated its Chinese emissions averaged over 2008-2010 at 1.4 Gg/yr of CF4 and 0.06 Gg/yr of C2F6. In this study we combine East Asian measurements of C2F6 at Gosan (Jeju Island, Korea), Hateruma, and Ochi-Ishi (Japan) and of CF4 at Gosan, using inversion techniques and two Lagrangian particle dispersion models (FLEXPART and NAME), to estimate the emissions of these two compounds from China and East Asia. Our results yield total emissions from China for the 2008-2010 period of approximately 4 × 0.5 Gg/yr for CF4 and 0.8 × 0.1 Gg/yr for C2F6. These results may be reconciled if emissions of these compounds from China's semiconductor (SC) industry are larger than currently estimated. However, evidence presented in the analysis of the inversion results and in the C2F6/CF4 emission ratios observed for China suggest that China's AL industry emissions are likely to be the dominant source of the discrepancy between reported emissions and those inferred from atmospheric measurements. As the AL and SC industries evolve toward new manufacturing technologies that reduce GHG emissions, continued and improved atmospheric measurements and modeling in this region will be useful in assessing the effectiveness of these changes.

  15. Efficient destruction of CF4 through in situ generation of alkali metals from heated alkali halide reducing mixtures.

    PubMed

    Lee, Myung Churl; Choi, Wonyong

    2002-03-15

    Perfluorocarbons (PFCs) are the most potent green house gases that are very recalcitrant at destruction. An effective way of converting PFCs using hot solid reagents into safe products has been recently introduced. By investigating the thermal reductive destruction of tetrafluoromethane (CF4) we provided new insight and more physicochemical consideration on this novel process. The complete destruction of CF4was successfully achieved by flowing the gas through a heated reagent bed (400-950 degrees C) that contained powder mixtures of alkali halides, CaO, and Si. The silicon acted as a reducing agent of alkali halides for the in-situ production of alkali metals, and the calcium oxide played the role of a halide ion acceptor. The absence of any single component in this ternary mixture drastically reduced the destruction efficiency of CF4. The CF4 destruction efficiencies with the solid reagent containing the alkali halide, MX, increased in the order of Li approximately Na < K < Cs for alkali cations and I < Br < Cl < F for halide anions. This trend agreed with the endothermicity of the alkali metal generation reaction: the higher the endothermicity, the lower the destruction efficiency. Alkali metal generation was indirectly detected by monitoring H2 production from its reaction with water. The production of alkali metals increased with NaF, KF, and CsF in this order. The CsF/CaO/Si system exhibited the complete destruction of CF4 at as low as 600 degrees C. The solid product analysis by X-ray diffraction (XRD) showed the formation of CaF2 and the depletion of Si with black carbon particles formed in the solid reagent residue. No CO/CO2 and toxic HF and SiF4 formation were detected in the exhaust gas. PMID:11944694

  16. Effect of strongly coupled plasma on photoionization cross section

    NASA Astrophysics Data System (ADS)

    Das, Madhusmita

    2014-01-01

    The effect of strongly coupled plasma on the ground state photoionization cross section is studied. In the non relativistic dipole approximation, cross section is evaluated from bound-free transition matrix element. The bound and free state wave functions are obtained by solving the radial Schrodinger equation with appropriate plasma potential. We have used ion sphere potential (ISP) to incorporate the plasma effects in atomic structure calculation. This potential includes the effect of static plasma screening on nuclear charge as well as the effect of confinement due to the neighbouring ions. With ISP, the radial equation is solved using Shooting method approach for hydrogen like ions (Li+2, C+5, Al+12) and lithium like ions (C+3, O+5). The effect of strong screening and confinement is manifested as confinement resonances near the ionization threshold for both kinds of ions. The confinement resonances are very much dependent on the edge of the confining potential and die out as the plasma density is increased. Plasma effect also results in appearance of Cooper minimum in lithium like ions, which was not present in case of free lithium like ions. With increasing density the position of Cooper minimum shifts towards higher photoelectron energy. The same behaviour is also true for weakly coupled plasma where plasma effect is modelled by Debye-Huckel potential.

  17. Effect of strongly coupled plasma on photoionization cross section

    SciTech Connect

    Das, Madhusmita

    2014-01-15

    The effect of strongly coupled plasma on the ground state photoionization cross section is studied. In the non relativistic dipole approximation, cross section is evaluated from bound-free transition matrix element. The bound and free state wave functions are obtained by solving the radial Schrodinger equation with appropriate plasma potential. We have used ion sphere potential (ISP) to incorporate the plasma effects in atomic structure calculation. This potential includes the effect of static plasma screening on nuclear charge as well as the effect of confinement due to the neighbouring ions. With ISP, the radial equation is solved using Shooting method approach for hydrogen like ions (Li{sup +2}, C{sup +5}, Al{sup +12}) and lithium like ions (C{sup +3}, O{sup +5}). The effect of strong screening and confinement is manifested as confinement resonances near the ionization threshold for both kinds of ions. The confinement resonances are very much dependent on the edge of the confining potential and die out as the plasma density is increased. Plasma effect also results in appearance of Cooper minimum in lithium like ions, which was not present in case of free lithium like ions. With increasing density the position of Cooper minimum shifts towards higher photoelectron energy. The same behaviour is also true for weakly coupled plasma where plasma effect is modelled by Debye-Huckel potential.

  18. Component Framework for Loosely Coupled High Performance Integrated Plasma Simulations

    NASA Astrophysics Data System (ADS)

    Elwasif, W. R.; Bernholdt, D. E.; Shet, A. G.; Batchelor, D. B.; Foley, S.

    2010-11-01

    We present the design and implementation of a component-based simulation framework for the execution of coupled time-dependent plasma modeling codes. The Integrated Plasma Simulator (IPS) provides a flexible lightweight component model that streamlines the integration of stand alone codes into coupled simulations. Standalone codes are adapted to the IPS component interface specification using a thin wrapping layer implemented in the Python programming language. The framework provides services for inter-component method invocation, configuration, task, and data management, asynchronous event management, simulation monitoring, and checkpoint/restart capabilities. Services are invoked, as needed, by the computational components to coordinate the execution of different aspects of coupled simulations on Massive parallel Processing (MPP) machines. A common plasma state layer serves as the foundation for inter-component, file-based data exchange. The IPS design principles, implementation details, and execution model will be presented, along with an overview of several use cases.

  19. A new class of strongly coupled plasmas inspired by sonoluminescence

    NASA Astrophysics Data System (ADS)

    Bataller, Alexander; Plateau, Guillaume; Kappus, Brian; Putterman, Seth

    2014-10-01

    Sonoluminescence originates in a strongly coupled plasma with a near liquid density and a temperature of ~10,000 K. This plasma is in LTE and therefore, it should be a general thermodynamic state. To test the universality of sonoluminescence, similar plasma conditions were generated using femtosecond laser breakdown in high pressure gases. Calibrated streak spectroscopy reveals both transport and thermodynamic properties of a strongly coupled plasma. A blackbody spectrum, which persists long after the exciting laser has turned off, indicates the presence of a highly ionized LTE microplasma. In parallel with sonoluminescence, this thermodynamic state is achieved via a considerable reduction in the ionization potential. We gratefully acknowledge support from DARPA MTO for research on microplasmas. We thank Brian Naranjo, Keith Weninger, Carlos Camara, Gary Williams, and John Koulakis for valuable discussions.

  20. Equation of state of strongly coupled plasma mixtures

    SciTech Connect

    DeWitt, H.E.

    1984-02-03

    Thermodynamic properties of strongly coupled (high density) plasmas of mixtures of light elements have been obtained by Monte Carlo simulations. For an assumed uniform charge background the equation of state of ionic mixtures is a simple extension of the one-component plasma EOS. More realistic electron screening effects are treated in linear response theory and with an appropriate electron dielectric function. Results have been obtained for the ionic pair distribution functions, and for the electric microfield distribution.

  1. Probing strongly coupled anisotropic plasmas from higher curvature gravity

    NASA Astrophysics Data System (ADS)

    Jahnke, Viktor; Misobuchi, Anderson Seigo

    2016-06-01

    We consider five-dimensional AdS-axion-dilaton gravity with a Gauss-Bonnet term and use a black brane solution displaying spatial anisotropy as the gravity dual of a strongly coupled anisotropic plasma. We compute several observables relevant to the study of the plasma, namely, the drag force, the jet quenching parameter, the quarkonium potential, and the thermal photon production. The effects of higher derivative corrections and of the anisotropy are discussed and compared with previous results.

  2. Dust acoustic waves in strongly coupled dusty plasmas

    SciTech Connect

    Rosenberg, M. Kalman, G.

    1997-12-01

    Dust grains, or solid particles of {mu}m to sub-{mu}m sizes, are observed in various low-temperature laboratory plasmas such as process plasmas and dust plasma crystals. The massive dust grains are generally highly charged, and it has been shown within the context of standard plasma theory that their presence can lead to new low-frequency modes such as dust acoustic waves. In certain laboratory plasmas, however, the dust may be strongly coupled, as characterized by the condition {Gamma}{sub d}=Q{sub d}{sup 2}exp({minus}d/{lambda}{sub D})/dT{sub d}{ge}1, where Q{sub d} is the dust charge, d is the intergrain spacing, T{sub d} is the dust thermal energy, and {lambda}{sub D} is the plasma screening length. This paper investigates the dispersion relation for dust acoustic waves in a strongly coupled dusty plasma comprised of strongly coupled negatively charged dust grains, and weakly correlated classical ions and electrons. The dust grains are assumed to interact via a (screened Coulomb) Yukawa potential. The strongly coupled gas phase (liquid phase) is considered, and a quasilocalized charge approximation scheme is used, generalized to take into account electron and/or ion screening of the dust grains. The scheme relates the small-k dispersion to the total correlation energy of the system, which is obtained from the results of published numerical simulations. Some effects of collisions of charged particles with neutrals are taken into account. Applications to laboratory dusty plasmas are discussed. {copyright} {ital 1997} {ital The American Physical Society}

  3. Coupled Dust-Lattice Modes in Magnetized Complex Plasmas

    SciTech Connect

    Farokhi, B.; Shahmansouri, M.

    2008-09-07

    Dust lattice wave modes in a one dimensional plasma crystal (formed by paramagnetic dust particles) suspended in the plasma sheath are studied. The ion flow in the sheath introduces 'ion wakes' below the crystal particles. The wave dispersion relations are found under the influence of inhomogeneous magnetic field, wake charge effect and equilibrium charge gradient. The expression for the wave dispersion relations clearly show that three branches exist as a result of the coupling of longitudinal and transverse modes due to the Lorenz forces, charge gradient and wake charge effect. We observe a new coupling between the dust lattice modes, which have not reported so far.

  4. Helium-like magnesium embedded in strongly coupled plasma

    NASA Astrophysics Data System (ADS)

    Bhattacharyya, Sukhamoy

    2016-05-01

    In recent days, with the advent of the x-ray free electron laser (FEL) with Linac coherent light source (LCLS) and the Orion laser, experimental studies on atomic systems within strongly coupled plasma environment with remarkable improvement in accuracy as compared to earlier experiments have become possible. In these kinds of experiments, hydrogen-like and helium-like spectral lines are used for determination of plasma parameters such as temperature, density. Accurate theoretical calculations are, therefore, necessary for such kind of studies within a dense plasma environment. In this work, ab initio calculations are carried out in the framework of the Rayleigh-Ritz variation principle to estimate the ground state energy of helium-like magnesium within strongly coupled plasma environment. Explicitly correlated wave functions in Hylleraas coordinates have been used to incorporate the effect of electron correlation. The ion-sphere model potential that confines the central positive ion in a finite domain filled with plasma electrons has been adopted to mimic the strongly coupled plasma environment. Thermodynamic pressure 'felt' by the ion in the ground states due to the confinement inside the ion spheres is also estimated.

  5. Nonlinear Generalized Hydrodynamic Wave Equations in Strongly Coupled Dusty Plasmas

    SciTech Connect

    Veeresha, B. M.; Sen, A.; Kaw, P. K.

    2008-09-07

    A set of nonlinear equations for the study of low frequency waves in a strongly coupled dusty plasma medium is derived using the phenomenological generalized hydrodynamic (GH) model and is used to study the modulational stability of dust acoustic waves to parallel perturbations. Dust compressibility contributions arising from strong Coulomb coupling effects are found to introduce significant modifications in the threshold and range of the instability domain.

  6. Suppression of Rayleigh Taylor instability in strongly coupled plasmas

    SciTech Connect

    Das, Amita; Kaw, Predhiman

    2014-06-15

    The Rayleigh Taylor instability in a strongly coupled plasma medium has been investigated using the equations of generalized hydrodynamics. It is demonstrated that the visco-elasticity of the strongly coupled medium due to strong inter particle correlations leads to a suppression of the Rayleigh Taylor instability unless certain threshold conditions are met. The relevance of these results to experiments on laser compression of matter to high densities including those related to inertial confinement fusion using lasers has also been shown.

  7. Method of processing materials using an inductively coupled plasma

    DOEpatents

    Hull, D.E.; Bieniewski, T.M.

    1987-04-13

    A method of processing materials. The invention enables ultrafine, ultrapure powders to be formed from solid ingots in a gas free environment. A plasma is formed directly from an ingot which insures purity. The vaporized material is expanded through a nozzle and the resultant powder settles on a cold surface. An inductively coupled plasma may also be used to process waste chemicals. Noxious chemicals are directed through a series of plasma tubes, breaking molecular bonds and resulting in relatively harmless atomic constituents. 3 figs.

  8. Inductively coupled plasma torch with laminar flow cooling

    DOEpatents

    Rayson, Gary D.; Shen, Yang

    1991-04-30

    An improved inductively coupled gas plasma torch. The torch includes inner and outer quartz sleeves and tubular insert snugly fitted between the sleeves. The insert includes outwardly opening longitudinal channels. Gas flowing through the channels of the insert emerges in a laminar flow along the inside surface of the outer sleeve, in the zone of plasma heating. The laminar flow cools the outer sleeve and enables the torch to operate at lower electrical power and gas consumption levels additionally, the laminar flow reduces noise levels in spectroscopic measurements of the gaseous plasma.

  9. Collisional coupling in counterstreaming laser-produced plasmas

    NASA Technical Reports Server (NTRS)

    Koopman, D. W.; Goforth, R. R.

    1974-01-01

    The collisional processes which transfer momentum between counterstreaming plasmas are reviewed and applied to the example of a laser-produced plasma expanding into a partially ionized background. Experimental measurements of the dependence of the ion flow field on collisional momentum transfer demonstrate the validity of the simplified treatment of collision processes which have been adopted. A numerical model which simulates the laser-plasma interaction with the background confirms the importance of collisions in previous experimental studies of momentum coupling, and provides some insight into the distinction between collisional and collisionless flow regimes.

  10. Effect of bias application to plasma density in weakly magnetized inductively coupled plasma

    SciTech Connect

    Kim, Hyuk; Lee, Woohyun; Park, Wanjae; Whang, Ki-Woong

    2013-07-15

    Independent control of the ion flux and energy can be achieved in a dual frequency inductively coupled plasma (ICP) system. Typically, the plasma density is controlled by the high-frequency antenna radio-frequency (RF) power and the ion energy is controlled by the low-frequency bias RF power. Increasing the bias power has been known to cause a decrease in the plasma density in capacitively coupled discharge systems as well as in ICP systems. However, an applied axial magnetic field was found to sustain or increase the plasma density as bias power is increased. Measurements show higher electron temperatures but lower plasma densities are obtained in ordinary ICP systems than in magnetized ICP systems under the same neutral gas pressure and RF power levels. Explanations for the difference in the behavior of plasma density with increasing bias power are given in terms of the difference in the heating mechanism in ordinary unmagnetized and magnetized ICP systems.

  11. Effect of antenna capacitance on the plasma characteristics of an internal linear inductively coupled plasma system

    NASA Astrophysics Data System (ADS)

    Lim, Jong Hyeuk; Kim, Kyong Nam; Park, Jung Kyun; Yeom, Geun Young

    2008-08-01

    This study examined the effect of the antenna capacitance of an inductively coupled plasma (ICP) source, which was varied using an internal linear antenna, on the electrical and plasma characteristics of the ICP source. The inductive coupling at a given rf current increased with decreasing antenna capacitance. This was caused by a decrease in the inner copper diameter of the antenna made from coaxial copper/quartz tubing, which resulted in a higher plasma density and lower plasma potential. By decreasing the diameter of the copper tube from 25to10mm, the plasma density of a plasma source size of 2750×2350mm2 was increased from approximately 8×1010/cm3to1.5×1011/cm3 at 15mTorr Ar and 9kW of rf power.

  12. Model for a transformer-coupled toroidal plasma source

    SciTech Connect

    Rauf, Shahid; Balakrishna, Ajit; Chen Zhigang; Collins, Ken

    2012-01-15

    A two-dimensional fluid plasma model for a transformer-coupled toroidal plasma source is described. Ferrites are used in this device to improve the electromagnetic coupling between the primary coils carrying radio frequency (rf) current and a secondary plasma loop. Appropriate components of the Maxwell equations are solved to determine the electromagnetic fields and electron power deposition in the model. The effect of gas flow on species transport is also considered. The model is applied to 1 Torr Ar/NH{sub 3} plasma in this article. Rf electric field lines form a loop in the vacuum chamber and generate a plasma ring. Due to rapid dissociation of NH{sub 3}, NH{sub x}{sup +} ions are more prevalent near the gas inlet and Ar{sup +} ions are the dominant ions farther downstream. NH{sub 3} and its by-products rapidly dissociate into small fragments as the gas flows through the plasma. With increasing source power, NH{sub 3} dissociates more readily and NH{sub x}{sup +} ions are more tightly confined near the gas inlet. Gas flow rate significantly influences the plasma characteristics. With increasing gas flow rate, NH{sub 3} dissociation occurs farther from the gas inlet in regions with higher electron density. Consequently, more NH{sub 4}{sup +} ions are produced and dissociation by-products have higher concentrations near the outlet.

  13. Measurements and Simulations of the Energy Distributions of Ions Bombarding Radio-frequency Biased Electrodes in an Inductively Coupled Plasma Reactor

    NASA Astrophysics Data System (ADS)

    Edelberg, Erik A.; Perry, Andrew; Benjamin, Neil; Aydil, Eray S.

    1998-10-01

    A compact retarding field ion energy analyzer has been designed and built to measure the energy distribution of ions bombarding the surface of radio frequency (rf) biased electrodes in high-density plasma reactors. Specifically, the analyzer was installed in the rf biased electrostatic chuck of a high-density, transformer-coupled plasma (TCP) reactor. The effects of TCP power, rf bias power, pressure, and gas composition on the measured ion energy distributions are demonstrated through Ar, Ne, Ar/Ne, O2 and CF4/O2 discharges. To complement the experimental results, a numerical sheath model that predicts the spatio-temporal variations of the potential across the sheath in a high density plasma has been developed. The energy distribution of ions bombarding the rf biased surface is then calculated using Monte Carlo simulations of the ion trajectories. Bimodal ion energy distributions resulting from ion energy modulation in the sheath were observed and simulated. Multiple peaks in the IEDs measured in gas mixtures were identified as signatures of ions with different masses falling through the sheath. The simulations predict both the energy separation of the bimodal IEDs as well as the ratio of the peak heights as measured by the ion energy analyzer.

  14. Debye Shielding and Particle Correlations in Strongly Coupled Dusty Plasmas

    SciTech Connect

    Otani, N.; Bhattacharjee, A.

    1997-02-01

    A particle-in-cell simulation method is shown effective in modeling strongly coupled plasmas, exhibiting good energy conservation properties and good resolution of the dust-particle interaction. For coupling parameters of order unity, the simulation dust particles exhibit Debye shielding on the spatial scale of the dust Debye length. When initialized with a large coupling parameter, the dust particles do not organize themselves into a crystalline structure as expected, but instead are scattered by the presence of substantial electrostatic wave activity. Liquid-like or crystal-like correlations among the dust particles occur only when annealing is imposed. {copyright} {ital 1997} {ital The American Physical Society}

  15. Hollow cathode plasma coupling study, 1986

    NASA Technical Reports Server (NTRS)

    Wilbur, Paul J.

    1986-01-01

    The electron collection and emission characteristics of a simple hollow cathode contactor, an extended anode hollow cathode contactor supplied by JSC, and a ring cusp magnetic field contactor are presented and the effects of discharge power and argon or xenon expellant flowrate on these characteristics are examined. All of the contactors are shown to exhibit good electron emission performance over a wide range of discharge power and expellant type and flowrate. Good electron performance is shown to be more difficult to achieve. Results suggest that the extended anode and ring cusp contactors should perform satisfactorily to electron emission currents beyond 1000 mA and electron collection currents beyond 500 mA. All contactors performed better on xenon than argon. A general theory of plasma contactor operation in both the electron collection and electron emission modes, which describes the current-limiting effects of space-charge phenomena is given. This current-limiting and collecting phenomenon is shown to be a function of driving potential differences and emitting and collecting surface radius ratio for the case of a spherical geometry. Discharge power did not appear to influence the electron collection current substantially in the experiments so it is suggested in light of the model that the contactors are generally not limited by their ion production capabilities under conditions at which they were tested.

  16. Jeans self gravitational instability of strongly coupled quantum plasma

    SciTech Connect

    Sharma, Prerana; Chhajlani, R. K.

    2014-07-15

    The Jeans self-gravitational instability is studied for quantum plasma composed of weakly coupled degenerate electron fluid and non-degenerate strongly coupled ion fluid. The formulation for such system is done on the basis of two fluid theory. The dynamics of weakly coupled degenerate electron fluid is governed by inertialess momentum equation. The quantum forces associated with the quantum diffraction effects and the quantum statistical effects act on the degenerate electron fluid. The strong correlation effects of ion are embedded in generalized viscoelastic momentum equation including the viscoelasticity and shear viscosities of ion fluid. The general dispersion relation is obtained using the normal mode analysis technique for the two regimes of propagation, i.e., hydrodynamic and kinetic regimes. The Jeans condition of self-gravitational instability is also obtained for both regimes, in the hydrodynamic regime it is observed to be affected by the ion plasma oscillations and quantum parameter while in the kinetic regime in addition to ion plasma oscillations and quantum parameter, it is also affected by the ion velocity which is modified by the viscosity generated compressional effects. The Jeans critical wave number and corresponding critical mass are also obtained for strongly coupled quantum plasma for both regimes.

  17. Coupling of dust acoustic and shear mode through velocity shear in a strongly coupled dusty plasma

    SciTech Connect

    Garai, S. Janaki, M. S.; Chakrabarti, N.

    2015-07-15

    In the strongly coupled limit, the generalized hydrodynamic model shows that a dusty plasma, acquiring significant rigidity, is able to support a “shear” like mode. It is being demonstrated here that in presence of velocity shear gradient, this shear like mode gets coupled with the dust acoustic mode which is generated by the compressibility effect of the dust fluid due to the finite temperatures of the dust, electron, and ion fluids. In the local analysis, the dispersion relation shows that velocity shear gradient not only couples the two modes but is also responsible for the instabilities of that coupled mode which is confirmed by nonlocal analysis with numerical techniques.

  18. Determination of Electron Swarm Parameters in Pure CHF3 and CF4 by a Time-Resolved Method

    NASA Astrophysics Data System (ADS)

    Xiao, Dengming; Deng, Yunkun

    2013-01-01

    The density-normalized effective ionization coefficient (α - η)/N (α and η are the ionization and attachment coefficients respectively), the electron drift velocity Ve and density-normalized longitudinal diffusion coefficient NDL in trifluoromethane (CHF3) and carbon tetrafluoride (CF4) were measured using a pulsed Townsend technique over a wide E/N range. From the plots of (α - η)/N, we have derived the limiting field strength, (E/N)lim, which is valid for the analysis of insulation characteristics and applications to power equipment. Comparisons of the electron swarms parameters between CHF3 and CF4 have been performed, and the global warming potential (GWP) is also taken into account.

  19. Effective ionization coefficients, limiting electric fields, and electron energy distributions in CF3I + CF4 + Ar ternary gas mixtures

    NASA Astrophysics Data System (ADS)

    Tezcan, S. S.; Dincer, M. S.; Bektas, S.

    2016-07-01

    This paper reports on the effective ionization coefficients, limiting electric fields, electron energy distribution functions, and mean energies in ternary mixtures of (Trifluoroiodomethane) CF3I + CF4 + Ar in the E/N range of 100-700 Td employing a two-term solution of the Boltzmann equation. In the ternary mixture, CF3I component is increased while the CF4 component is reduced accordingly and the 40% Ar component is kept constant. It is seen that the electronegativity of the mixture increases with increased CF3I content and effective ionization coefficients decrease while the limiting electric field values increase. Synergism in the mixture is also evaluated in percentage using the limiting electric field values obtained. Furthermore, it is possible to control the mean electron energy in the ternary mixture by changing the content of CF3I component.

  20. Improvement of uniformity in a weakly magnetized inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Lee, W. H.; Cheong, H. W.; Kim, J. W.; Whang, K. W.

    2015-12-01

    Magnetic fields are applied to inductively coupled plasma (ICP) to achieve high plasma densities using electromagnets. If the magnetic fields are set up such that the magnitude of magnetic flux density on the substrate decreases with both radial and axial distances from the substrate’s center (here after referred to as M-ICP-A), the plasma density increases by 237% compared with that for ICP although the non-uniformity of the plasma density for M-ICP-A (11.1%) is higher than that for ICP (10.9%). As the rate of decrease in the magnitude of magnetic flux density on the substrate increases both radially and axially, the non-uniformity in the plasma density increases further. The increase in the non-uniformity for M-ICP-A was confirmed to arise from the flute instability. To suppress the flute instability, we arranged the magnitude of magnetic flux density on the substrate to increase with increasing distance from the substrate center both radially and axially (here after referred to as M-ICP-V). In this configuration, plasma fluctuations were not observed, hence the plasma density non-uniformity was lowered to 8.1%, although the measured plasma density was higher than that for M-ICP-A. The oxide etch-rate non-uniformity in M-ICP-V (2.5%) was also lower than that for ICP (5.2%) or that for M-ICP-A (21.4%).

  1. AETHER: A simulation platform for inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Turkoz, Emre; Celik, Murat

    2015-04-01

    An in-house code is developed to simulate the inductively coupled plasma (ICP). The model comprises the fluid, electromagnetic and transformer submodels. Fluid equations are solved to evaluate the plasma flow parameters, including the plasma and neutral densities, ion and neutral velocities, electron flux, electron temperature, and electric potential. The model relies on the ambipolar approximation and offers the evaluation of plasma parameters without solving the sheath region. The electromagnetic model handles the calculation of the electric and magnetic fields using the magnetic vector potential. The transformer model captures the effect of the matching circuit utilized in laboratory experiments for RF power deposition. The continuity and momentum equations are solved using finite volume method. The energy, electric potential, and magnetic vector potential equations are solved using finite difference method. The resulting linear systems of equations are solved with iterative solvers including Jacobi and GMRES. The code is written using the C++ programming language, it works in parallel and has graphical user interface. The model is applied to study ICP characteristics of a plasma confined within a cylindrical chamber with dielectric walls for two different power deposition cases. The results obtained from the developed model are verified using the plasma module of COMSOL Multiphysics. The model is also applied to a plasma source configuration, and it is demonstrated that there is an overall increase in the plasma potential when current is extracted from ICP with a biased wall electrode.

  2. Electron energy distributions in a magnetized inductively coupled plasma

    SciTech Connect

    Song, Sang-Heon E-mail: Sang-Heon.Song@us.tel.com; Yang, Yang; Kushner, Mark J.

    2014-09-15

    Optimizing and controlling electron energy distributions (EEDs) is a continuing goal in plasma materials processing as EEDs determine the rate coefficients for electron impact processes. There are many strategies to customize EEDs in low pressure inductively coupled plasmas (ICPs), for example, pulsing and choice of frequency, to produce the desired plasma properties. Recent experiments have shown that EEDs in low pressure ICPs can be manipulated through the use of static magnetic fields of sufficient magnitudes to magnetize the electrons and confine them to the electromagnetic skin depth. The EED is then a function of the local magnetic field as opposed to having non-local properties in the absence of the magnetic field. In this paper, EEDs in a magnetized inductively coupled plasma (mICP) sustained in Ar are discussed with results from a two-dimensional plasma hydrodynamics model. Results are compared with experimental measurements. We found that the character of the EED transitions from non-local to local with application of the static magnetic field. The reduction in cross-field mobility increases local electron heating in the skin depth and decreases the transport of these hot electrons to larger radii. The tail of the EED is therefore enhanced in the skin depth and depressed at large radii. Plasmas densities are non-monotonic with increasing pressure with the external magnetic field due to transitions between local and non-local kinetics.

  3. Simulation of Plasma Characteristics for Inductively Coupled Argon Plasma Using Dual-Frequency Antennas

    NASA Astrophysics Data System (ADS)

    Li, Xue-Chun; Sun, Xiao-Yan; Wang, You-Nian

    2014-10-01

    A large-area wafer size is necessary for plasma processing in the micro-electronics industry. However, it is one of the most important issues to obtain uniform plasma over a large-area substrate in addition to high-density plasmas for the plasma processing. Recently, the experimental study on the dual-frequency inductively coupled plasma (ICP) has been reported as a mean of improving the plasma uniformity over the large-area substrate. In this work, we develop a self-consistent method combined with the electromagnetic theory and fluid model to simulate the plasma characteristics for dual-frequency inductively coupled argon plasma. In the model, the ICP source consists of two planar-spiral coils. We investigate the plasma uniformity problem by adjusting the parameters of the two coils, such as the RF current, the position of the coils and the RF frequency ratio. It was found that the uniformity of the ion density over the wafer is improved with dual-frequency antennas comparing with a single-frequency antenna. The plasma uniformity increases when the coils are located farther from the centre of the ICP source. It is consistent with the experimental study. This work was supported by the National Natural Science Foundation of China (No. 11175034, No. 11075029).

  4. Collective dynamics in strongly coupled dusty plasma medium

    NASA Astrophysics Data System (ADS)

    Das, Amita; Dharodi, Vikram; Tiwari, Sanat; Tiwari

    2014-12-01

    A simplified description of dynamical response of strongly coupled medium is desirable in many contexts of physics. The dusty plasma medium can play an important role in this regard due to its uniqueness, as its dynamical response typically falls within the perceptible grasp of human senses. Furthermore, even at room temperature and normal densities it can be easily prepared to be in a strongly coupled regime. A simplified phenomenological fluid model based on the visco - elastic behaviour of the medium is often invoked to represent the collective dynamical response of a strongly coupled dusty plasma medium. The manuscript reviews the role of this particular Generalized Hydrodynamic (GHD) fluid model in capturing the collective properties exhibited by the medium. In addition the paper also provides new insights on the collective behaviour predicted by the model for the medium, in terms of coherent structures, instabilities, transport and mixing properties.

  5. Relations for the thermodynamic and transport properties in the testing environment of the Langley hypersonic CF4 tunnel

    NASA Astrophysics Data System (ADS)

    Sutton, K.

    1981-10-01

    Thermodynamic and transport properties of gaseous CF4 that can be used in flow field computer codes and theoretical analyses for comparison of results with experimental data from the Langley Hypersonic CF4 Tunnel are presented. The thermodynamic relations which are based on thermally perfect but calorifically imperfect gas are adequate for the testing environment of the CF4 tunnel and are simpler to use than the imperfect gas relations required to define the complete expansion from the tunnel reservoir. Relations for the transport properties are based on the kinetic theory of gases in which published experimental data are used in the derivation of the relations. Extensive experimental data were located for viscosity and the derived relation should provide values for viscosity with errors of less than 1 percent. The experimental data for thermal conductivity were limited with significant disagreement between the various sources. The derived relation will probably provide values for the thermal conductivity with errors of no more than 5 percent which is within the accuracy of the experimental data.

  6. Use of a pulse-periodic optically pumped CF4 laser for photofragmentation of UF6 molecules

    NASA Astrophysics Data System (ADS)

    Kolesnikov, Yurij A.; Kotov, A. A.; Novikov, Victor P.

    1998-05-01

    Investigations of fragmentation of uranium hexafluoride molecules in radiation field of the optically pumped CF4 laser are carried out. The optical pumping was made by the pulse-periodic TEA CO2 laser. The optical cell of the CF4 laser was cooled by nitrogen vapor with automatic stabilization of the temperature. The maximum radiation energy carried by a single CF4 laser pulse is 250 mJ and the average power at a pulse repetition frequency of 50 Hz is up to 6 W. It was found that besides the direct fragmentation of UF6 molecules, the bimolecular V-V exchange realizes most probably at collision of highly excited molecules, consequently the vibronic energy of one of the molecules can exceed the dissociation threshold. Increase by an order of the UF6 molecules photofragmentation efficiency at presence of hydrogen can be explained by high chemical activation because of reverse electron relaxation of highly vibronic excited UF6 molecules. There is also ascertained that polymerization of UF5 radicals appears to be the most high-speed of al secondary reactions. In the main part the polymers ar found on the cell surface having number of the radicals in range from 2 to approximately 10.

  7. Relations for the thermodynamic and transport properties in the testing environment of the Langley hypersonic CF4 tunnel

    NASA Technical Reports Server (NTRS)

    Sutton, K.

    1981-01-01

    Thermodynamic and transport properties of gaseous CF4 that can be used in flow field computer codes and theoretical analyses for comparison of results with experimental data from the Langley Hypersonic CF4 Tunnel are presented. The thermodynamic relations which are based on thermally perfect but calorifically imperfect gas are adequate for the testing environment of the CF4 tunnel and are simpler to use than the imperfect gas relations required to define the complete expansion from the tunnel reservoir. Relations for the transport properties are based on the kinetic theory of gases in which published experimental data are used in the derivation of the relations. Extensive experimental data were located for viscosity and the derived relation should provide values for viscosity with errors of less than 1 percent. The experimental data for thermal conductivity were limited with significant disagreement between the various sources. The derived relation will probably provide values for the thermal conductivity with errors of no more than 5 percent which is within the accuracy of the experimental data.

  8. Decomposition of Potent Greenhouse Gases SF6, CF4 and SF5CF3 by Dielectric Barrier Discharge

    NASA Astrophysics Data System (ADS)

    Zhang, Renxi; Wang, Jingting; Cao, Xu; Hou, Huiqi

    2016-04-01

    For their distinguished global warming potential (GWP100) and long atmosphere lifespan, CF4, SF6 and SF5CF3 were significant in the field of greenhouse gas research. The details of discharging character and the optimal parameter were discussed by using a Dielectric Barrier Discharge (DBD) reactor to decompose these potent greenhouse gases in this work. The results showed that SF6 could be decomposed by 92% under the conditions of 5 min resident time and 3000 V applied voltage with the partial pressure of 2.0 kPa, 28.2 kPa, and 1.8 kPa for SF6, air and water vapor, respectively. 0.4 kPa CF4 could be decomposed by 98.2% for 4 min resident time with 30 kPa Ar added. The decomposition of SF5CF3 was much more effective than that of SF6 and CF4 and moreover, 1.3 kPa SF5CF3, discharged with 30 kPa O2, Ar and air, could not be detected when the resident time was 80 s, 40 s, and 120 s, respectively. All the results indicated that DBD was a feasible technique for the abatement of potent greenhouse gases. supported by National Natural Science Foundation of China (Nos. 20507004, 21577023)

  9. Three-wave coupling in electron-positron-ion plasmas

    SciTech Connect

    Tinakiche, N.; Annou, R.; Tripathi, V. K.

    2012-07-15

    The three-wave coupling processes in electron-positron-ion plasmas are investigated. The non-linear dispersion relation is derived along with the non-linear growth rate in both resonant and non resonant processes. It is shown that the inclusion of positron affects the dielectric properties of the plasma as well as the nonlinear growth rates of parametric processes. As one increases the positron density to electron density ratio from 0 to 1, maintaining quasi neutrality of the plasma, the growth rates of stimulated Raman, Brillouin, and Compton scattering processes in an isothermal plasma tend to zero due to the ponderomotive forces acting on electrons and positrons due the pump and scattered waves being equal.

  10. Energy exchange in strongly coupled plasmas with electron drift

    SciTech Connect

    Akbari-Moghanjoughi, M.; Ghorbanalilu, M.

    2015-11-15

    In this paper, the generalized viscoelastic collisional quantum hydrodynamic model is employed in order to investigate the linear dielectric response of a quantum plasma in the presence of strong electron-beam plasma interactions. The generalized Chandrasekhar's relativistic degeneracy pressure together with the electron-exchange and Coulomb interaction effects are taken into account in order to extend current research to a wide range of plasma number density relevant to big planetary cores and astrophysical compact objects. The previously calculated shear viscosity and the electron-ion collision frequencies are used for strongly coupled ion fluid. The effect of the electron-beam velocity on complex linear dielectric function is found to be profound. This effect is clearly interpreted in terms of the wave-particle interactions and their energy-exchange according to the sign of the imaginary dielectric function, which is closely related to the wave attenuation coefficient in plasmas. Such kinetic effect is also shown to be in close connection with the stopping power of a charged-particle beam in a quantum plasma. The effect of many independent plasma parameters, such as the ion charge-state, electron beam-velocity, and relativistic degeneracy, is shown to be significant on the growing/damping of plasma instability or energy loss/gain of the electron-beam.

  11. Energy exchange in strongly coupled plasmas with electron drift

    NASA Astrophysics Data System (ADS)

    Akbari-Moghanjoughi, M.; Ghorbanalilu, M.

    2015-11-01

    In this paper, the generalized viscoelastic collisional quantum hydrodynamic model is employed in order to investigate the linear dielectric response of a quantum plasma in the presence of strong electron-beam plasma interactions. The generalized Chandrasekhar's relativistic degeneracy pressure together with the electron-exchange and Coulomb interaction effects are taken into account in order to extend current research to a wide range of plasma number density relevant to big planetary cores and astrophysical compact objects. The previously calculated shear viscosity and the electron-ion collision frequencies are used for strongly coupled ion fluid. The effect of the electron-beam velocity on complex linear dielectric function is found to be profound. This effect is clearly interpreted in terms of the wave-particle interactions and their energy-exchange according to the sign of the imaginary dielectric function, which is closely related to the wave attenuation coefficient in plasmas. Such kinetic effect is also shown to be in close connection with the stopping power of a charged-particle beam in a quantum plasma. The effect of many independent plasma parameters, such as the ion charge-state, electron beam-velocity, and relativistic degeneracy, is shown to be significant on the growing/damping of plasma instability or energy loss/gain of the electron-beam.

  12. Collision-less Coupling between Explosive Debris Plasma and Magnetized Ambient Plasma

    NASA Astrophysics Data System (ADS)

    Bondarenko, Anton Sergeivich

    The explosive expansion of a dense debris plasma cloud into relatively tenuous, magnetized, ambient plasma characterizes a wide variety of astrophysical and space environments, including supernova remnants, interplanetary coronal mass ejections, and ionospheric explosions. In these and other related phenomena, collision-less electro-magnetic processes rather than Coulomb collisions typically mediate the transfer of momentum and energy from the debris plasma to the ambient plasma. In an effort to better understand the detailed physics of collision-less coupling mechanisms, compliment in situ measurements, and provide validation of previous computational and theoretical work, the present research utilizes a unique experimental platform at the University of California, Los Angeles (UCLA) to study the interaction of explosive debris plasma with magnetized ambient plasma in a reproducible laboratory setting. Specifically, by jointly employing the Large Plasma Device (LAPD) and the Phoenix laser facility, the super-Alfvenic, quasi-perpendicular expansion of laser-produced carbon (C) and hydrogen (H) debris plasma through preformed, magnetized helium (He) ambient plasma is investigated via a variety of sophisticated diagnostics, including emission spectroscopy, wavelength-filtered imaging, a magnetic flux probe, and a Langmuir probe. The key result is the direct observation of collision-less coupling via large Doppler shifts in a He II ion spectral line, which indicate that the ambient ions accelerate in response to the explosive debris plasma. Specifically, the He II ions accelerate along a trajectory that qualitatively corresponds to the large-scale laminar electric field generated by the debris expansion. A custom computational approach is utilized to simulate the initial He II ion response to the explosive debris plasma, and a synthetic Doppler-shifted wavelength spectrum constructed from the simulated ion velocities excellently reproduces the experimental

  13. Characteristics of Plasma Using a Ferromagnetic Enhanced Inductively Coupled Plasma Source

    NASA Astrophysics Data System (ADS)

    Kim, Kyong Nam; Hyeuk Lim, Jong; Park, Jung Kyun; Lim, Jong Tae; Yeom, Geun Young

    2008-09-01

    Plasma characteristics and electrical parameters of an internal linear inductively coupled plasma (ICP) source with a U-type antenna with/without a Ni-Zn ferromagnetic material installed near the antenna were investigated. The application of the ferromagnetic material to the antenna increased the plasma density, improved the plasma uniformity, lowered the antenna voltage, and increased the stability of the plasma during the operation. For the U-type ferromagnetic enhanced internal linear ICP source, a high density plasma on the order of 4.5×1011 cm-3 which is about three higher than that obtained for the source without the ferromagnetic material could be obtained at the pressure of 10 mTorr Ar and at the RF power of 600 W at 13.56 MHz.

  14. Thin film coating process using an inductively coupled plasma

    DOEpatents

    Kniseley, Richard N.; Schmidt, Frederick A.; Merkle, Brian D.

    1990-01-30

    Thin coatings of normally solid materials are applied to target substrates using an inductively coupled plasma. Particles of the coating material are vaporized by plasma heating, and pass through an orifice to a first vacuum zone in which the particles are accelerated to a velocity greater than Mach 1. The shock wave generated in the first vacuum zone is intercepted by the tip of a skimmer cone that provides a second orifice. The particles pass through the second orifice into a second zone maintained at a higher vacuum and impinge on the target to form the coating. Ultrapure coatings can be formed.

  15. Spectroscopic Measurements of Collision-less Coupling Between Explosive Debris Plasmas and Ambient, Magnetized Background Plasmas

    NASA Astrophysics Data System (ADS)

    Bondarenko, Anton; Schaeffer, Derek; Everson, Erik; Vincena, Stephen; van Compernolle, Bart; Constantin, Carmen; Clark, Eric; Niemann, Christoph

    2013-10-01

    Emission spectroscopy is currently being utilized in order to assess collision-less momentum and energy coupling between explosive debris plasmas and ambient, magnetized background plasmas of astrophysical relevance. In recent campaigns on the Large Plasma Device (LAPD) (nelec =1012 -1013 cm-3, Telec ~ 5 eV, B0 = 200 - 400 G) utilizing the new Raptor laser facility (1053 nm, 100 J per pulse, 25 ns FWHM), laser-ablated carbon debris plasmas were generated within ambient, magnetized helium background plasmas and prominent spectral lines of carbon and helium ions were studied in high spectral (0 . 01 nm) and temporal (50 ns) resolution. Time-resolved velocity components extracted from Doppler shift measurements of the C+4 227 . 1 nm spectral line along two perpendicular axes reveal significant deceleration as the ions stream and gyrate within the helium background plasma, indicating collision-less momentum coupling. The He+1 320 . 3 nm and 468 . 6 nm spectral lines of the helium background plasma are observed to broaden and intensify in response to the carbon debris plasma, indicative of strong electric fields (Stark broadening) and energetic electrons. The experimental results are compared to 2D hybrid code simulations.

  16. CAPILLARY ELECTROPHORESIS COUPLED ON-LINE WITH INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRY FOR ELEMENTAL SPECIATION

    EPA Science Inventory

    A novel interface to connect a capillary electrophoresis (CE) system with an inductively coupled plasma mass spectrometric (ICPMS) detector is reported here. The interface was built using a direct injection nebulizer (DIN) system. In this interface, the CE capillary was placed co...

  17. Study on spatial distribution of plasma parameters in a magnetized inductively coupled plasma

    SciTech Connect

    Cheong, Hee-Woon; Lee, Woohyun; Kim, Ji-Won; Whang, Ki-Woong; Kim, Hyuk; Park, Wanjae

    2015-07-15

    Spatial distributions of various plasma parameters such as plasma density, electron temperature, and radical density in an inductively coupled plasma (ICP) and a magnetized inductively coupled plasma (M-ICP) were investigated and compared. Electron temperature in between the rf window and the substrate holder of M-ICP was higher than that of ICP, whereas the one just above the substrate holder of M-ICP was similar to that of ICP when a weak (<8 G) magnetic field was employed. As a result, radical densities in M-ICP were higher than those in ICP and the etch rate of oxide in M-ICP was faster than that in ICP without severe electron charging in 90 nm high aspect ratio contact hole etch.

  18. Shear waves in an inhomogeneous strongly coupled dusty plasma

    SciTech Connect

    Janaki, M. S.; Banerjee, D.; Chakrabarti, N.

    2011-09-15

    The properties of electrostatic transverse shear waves propagating in a strongly coupled dusty plasma with an equilibrium density gradient are examined using the generalized hydrodynamic (GH) equation. In the usual kinetic limit, the resulting equation has similarity to zero energy Schrodinger's equation. This has helped in obtaining some exact eigenmode solutions in both Cartesian and cylindrical geometries for certain nontrivial density profiles. The corresponding velocity profiles and the discrete eigenfrequencies are obtained for several interesting situations and their physics discussed.

  19. Line-type inductively coupled plasma source with ferromagnetic module

    NASA Astrophysics Data System (ADS)

    Hyeuk Lim, Jong; Kim, Kyong Nam; Gweon, Gwang Ho; Yeom, Geun Young

    2009-01-01

    The characteristics of a line-type, internal antenna for an inductively coupled plasma (ICP) source installed with a ferromagnetic module were investigated for possible application to roll-to-roll processing of next-generation display devices. The use of 2 MHz instead of 13.56 MHz for the 2300 mm long ICP source improved the plasma uniformity to less than 11% along the antenna line. In addition, the use of Ni-Zn ferromagnetic material in the line-type antenna improved the plasma density to about 3.1 × 1011 cm-3 at 3500 W of 2 MHz radio frequency power by confining the induced, time-varying magnetic field between the antenna line and the substrate. When the photoresist-covered glass substrate was etched at 4000 W using 40 mTorr and Ar/O2 (7 : 3), an etch uniformity of about 5-6% was obtained along the antenna line.

  20. Mechanism for Plasma Etching of Shallow Trench Isolation Features in an Inductively Coupled Plasma

    NASA Astrophysics Data System (ADS)

    Agarwal, Ankur; Rauf, Shahid; He, Jim; Choi, Jinhan; Collins, Ken

    2011-10-01

    Plasma etching for microelectronics fabrication is facing extreme challenges as processes are developed for advanced technological nodes. As device sizes shrink, control of shallow trench isolation (STI) features become more important in both logic and memory devices. Halogen-based inductively coupled plasmas in a pressure range of 20-60 mTorr are typically used to etch STI features. The need for improved performance and shorter development cycles are placing greater emphasis on understanding the underlying mechanisms to meet process specifications. In this work, a surface mechanism for STI etch process will be discussed that couples a fundamental plasma model to experimental etch process measurements. This model utilizes ion/neutral fluxes and energy distributions calculated using the Hybrid Plasma Equipment Model. Experiments are for blanket Si wafers in a Cl2/HBr/O2/N2 plasma over a range of pressures, bias powers, and flow rates of feedstock gases. We found that kinetic treatment of electron transport was critical to achieve good agreement with experiments. The calibrated plasma model is then coupled to a string-based feature scale model to quantify the effect of varying process parameters on the etch profile. We found that the operating parameters strongly influence critical dimensions but have only a subtle impact on the etch depths.

  1. Trace elements in seminal plasma of men from infertile couples

    PubMed Central

    Szynkowska, Małgorzata I.; Motak-Pochrzęst, Hanna; Pawlaczyk, Aleksandra; Sypniewski, Stanisław

    2015-01-01

    Introduction An analysis of lead, zinc, cadmium and other trace elements in semen of men from infertile couples was performed to determine the association between abnormal semen parameters and enviromental or occupational exposure to some trace metals. Material and methods Presence of manganese, cobalt, nickel, copper, zinc, molybdenum, cadmium, tin and lead was measured in seminal plasma of 34 men from infertile couples using spectrometry with time-of-flight analysis. Correlations among sperm parameters and trace metals were determined using cluster analysis and Pearson's correlation coefficient. Results Abnormally high concentrations of lead, cadmium, zinc and cobalt were found in 23 seminal plasma of men from infertile couples. The most consistent evidence was determined for an association between high cadmium concentration in seminal plasma and sperm count, motility and morphology below reference limits (p < 0.01). A correlation of significantly increased tin level and reduced sperm count in semen of men with limited fertility potential was observed (p = 0.04). Conclusions In our study we observed a correlation of tin level with sperm count in semen of men with limited fertility potential. PMID:26170853

  2. Numerical Experiments In Strongly Coupled Complex (Dusty) Plasmas

    NASA Astrophysics Data System (ADS)

    Hou, L. J.; Ivlev A.; Hubertus M. T.; Morfill, G. E.

    2010-07-01

    Complex (dusty) plasma is a suspension of micron-sized charged dust particles in a weakly ionized plasma with electrons, ions, and neutral atoms or molecules. Therein, dust particles acquire a few thousand electron charges by absorbing surrounding electrons and ions, and consequently interact with each other via a dynamically screened Coulomb potential while undergoing Brownian motion due primarily to frequent collisions with the neutral molecules. When the interaction potential energy between charged dust particles significantly exceeds their kinetic energy, they become strongly coupled and can form ordered structures comprising liquid and solid states. Since the motion of charged dust particles in complex (dusty) plasmas can be directly observed in real time by using a video camera, such systems have been generally regarded as a promising model system to study many phenomena occurring in solids, liquids and other strongly-coupled systems at the kinetic level, such as phase transitions, transport processes, and collective dynamics. Complex plasma physics has now grown into a mature research field with a very broad range of interdisciplinary facets. In addition to usual experimental and theoretical study, computer simulation in complex plasma plays an important role in bridging experimental observations and theories and in understanding many interesting phenomena observed in laboratory. The present talk will focus on a class of computer simulations that are usually non-equilibrium ones with external perturbation and that mimic the real complex plasma experiments (i. e., numerical experiment). The simulation method, i. e., the so-called Brownian Dynamics methods, will be firstly reviewed and then examples, such as simulations of heat transfer and shock wave propagation, will be present.

  3. A study on plasma parameters in various mixed Ar/SF6 inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Oh, Seung-Ju; Lee, Hyo-Chang; Chung, Chin-Wook

    2011-10-01

    SF6 gas or Ar/SF6 mixing gas is widely used in plasma processes. However, there are a little experimental study with various external parameters such as gas pressures and mixing ratios. In this work, a study of the plasma parameters was done in Ar/SF6 inductively coupled plasma (ICP) from a careful measurement of the electron energy distribution function (EEDF). The measured plasma parameters are compared to the theoretical results with simplified global model. At a low gas pressure, as mixing ratio of SF6 gas increased at a fixed ICP power, electron density decreased and electron temperature increased, but they were not changed largely. However, a remarkable increase in the electron temperature was observed with decrease in the electron density at higher gas pressures. These changes in the plasma parameters could be explained by large electron losses due to the electron attachment and the experimental results were in agreement with the theoretical results.

  4. Control of plasma density distribution via wireless power transfer in an inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Lee, Hee-Jin; Lee, Hyo-Chang; Kim, Young-Cheol; Chung, Chin-Wook

    2013-06-01

    With an enlargement of the wafer size, development of large-area plasma sources and control of plasma density distribution are required. To control the spatial distribution of the plasma density, wireless power transfer is applied to an inductively coupled plasma for the first time. An inner powered antenna and an outer resonant coil connected to a variable capacitor are placed on the top of the chamber. As the self-resonance frequency ωr of the resonant coil is adjusted, the power transfer rate from the inner powered coil to the outer resonant coil is changed and the dramatic evolution of the plasma density profile is measured. As ωr of the outer resonant coil changes from the non-resonant condition (where ωr is not the driving angular frequency ωrf) to the resonant condition (where ωr = ωrf), the plasma density profile evolves from a convex shape with maximal plasma density at the radial center into a concave shape with maximal plasma density in the vicinity of the resonant antenna coil. This result shows that the plasma density distribution can be successfully controlled via wireless resonance power transfer.

  5. Kinetic Effects in Low Pressure Capacitively Coupled Plasmas

    NASA Astrophysics Data System (ADS)

    Likhanskii, Alexandre; Roark, Christine; Stoltz, Peter

    2011-10-01

    We present results of particle-in-cell/Monte Carlo collision simulations of kinetic effects in low pressure capacitively coupled plasma discharge. In particular, we examine discharges of various gases (including Ar, Xe, and others) in the pressure range of 10s of mT and the frequency range of 10s of MHz. We track the formation of high energy electrons (e.g., at the ionization threshold or greater) as a marker for enhanced ionization, and look at the effects of elastic and inelastic collisions on the formation of these high energy electron bunches. We show results for 2D and 3D simulations where we include density gradient effects, and results for plasma chemistry effects on the bulk electron energy distribution function and the ion energy distribution function at a plasma surface interface. We discuss the role of the bunches on electron heating in the plasma bulk and on their presence on how electron heating is treated in fluid simulations of plasma sources.

  6. A Generalized Hydrodynamics Model for Strongly Coupled Plasmas

    NASA Astrophysics Data System (ADS)

    Diaw, Abdourahmane; Murillo, Michael Sean

    2015-11-01

    Starting with the equations of the Bogoliubov-Born-Green-Kirkwood-Yvon hierarchy, we obtain the density, momentum and stress tensor-moment equations. The closure proceeds in two steps. The first that guarantees an equilibrium state is given by density functional theory. It ensures self consistency in the equation-of-state properties of the plasma. The second involves modifying the two-body distribution function to include collisions in the relaxation of the stress tensor. The resulting generalized hydrodynamics thus includes all impacts of Coulomb coupling, viscous damping, and the high-frequency response. We compare our results with those of several known models, including generalized hydrodynamic theory and models obtained using the Singwi-Tosi-Land-Sjolander approximation and the quasi-localized charge approximation. We find that the viscoelastic response, including both the high-frequency elastic generalization and viscous wave damping, is important for correctly describing ion-acoustic waves. We illustrate this result by considering three very different systems: ultracold plasmas, dusty plasmas, and dense plasmas. The new model is validated by comparing its results with those obtained from molecular-dynamics simulations of Yukawa plasmas, and the agreement is excellent. This work was supported by the Air Force Office of Scientific Research (Grant No. FA9550-12-1-0344).

  7. The Importance of Optical Pathlength Control for Plasma Absorption Measurements

    NASA Technical Reports Server (NTRS)

    Cruden, Brett A.; Rao, M. V. V. S.; Sharma, Surendra P.; Meyyappan, M.; Partridge, Harry (Technical Monitor)

    2001-01-01

    An inductively coupled GEC Cell with modified viewing ports has been used to measure in-situ absorption in CF4 plasmas via Fourier Transform Infrared Spectroscopy, and the results compared to those obtained in a standard viewport configuration. The viewing ports were modified so that the window boundary is inside, rather than outside, of the GEC cell. Because the absorption obtained is a spatially integrated absorption, measurements made represent an averaging of absorbing species inside and outside of the plasma. This modification is made to reduce this spatial averaging and thus allow a more accurate estimation of neutral species concentrations and temperatures within the plasmas. By reducing this pathlength, we find that the apparent CF4 consumption increases from 65% to 95% and the apparent vibrational temperature of CF4 rises by 50-75 K. The apparent fraction of etch product SiF4 decreases from 4% to 2%. The data suggests that these density changes may be due to significant temperature gradients between the plasma and chamber viewports.

  8. Space- and Time-dependent electron velocity distribution in VHF-CCP in CF4/Ar

    NASA Astrophysics Data System (ADS)

    Yagisawa, Takashi; Makabe, Toshiaki

    2009-10-01

    The electron velocity distribution (EVD) is fundamentally important for all aspects in plasma electronics. EVD given as a solution of the Boltzmann equation provides the swarm parameter as functions of external E/N and B/N utilized for a plasma simulation. Two-term expansion was traditionally employed for solving the Boltzmann equation. This method, however, cannot give EVD in a large E/N appearing in the ion sheath region in front of a wall surface. Particle simulation (PIC/MC) was also used to estimate EVD, but heavy computational load prohibits the sample of a large number of particles in order to eliminate the statistical fluctuation. A solution of the Boltzmann equation in phase space (velocity, position-space, and time) intrinsically involves numerical diffusion resulting from the differenciation of the advection terms. In this study, we develop the numerical procedure for predicting space- and time-dependent EVD. That is, the Boltzmann equation is solved in velocity space by using our direct numerical procedure (DNP) under the presence of 2D-t electric field distribution in VHF-CCP, calculated by the RCT model. Nonlinear behavior of EVD in the bulk plasma during one cycle of VHF (100 MHz) is discussed depending on the collisional relaxation time for energy and momentum of electrons. Also, we will investigate the temporal change of EVD in the sheath region under a large E/N.

  9. Plasma Characteristics Using Superimposed Dual Frequency Inductively Coupled Plasma Source for Next Generation Device Processing.

    PubMed

    Lee, Seung Min; Lee, Chul Hee; Kim, Tae Hyung; Yeom, Geun Young; Kim, Kyong Nam

    2015-11-01

    U-shaped inductively coupled plasma (ICP) source was investigated as a linear plasma source for the next generation roll-to-toll flexible display processing. For the radio frequency power to the source, the dual frequency composed of 13.56 MHz and 2 MHz was used and the effect of dual frequency to the U-shaped ICP source on the plasma density, electron temperature, and plasma uniformity was investigated. As the operating condition, 200 mTorr Ar was used without operating turbo pumps. The use of superimposed dual frequency composed of 13.56 MHz + 2 MHz instead the single frequency of 13.56 MHz increased the plasma density slightly at the same total power. In addition, the addition of 2 MHz rf power to 0.4 kW while maintaining 1 kW 13.56 MHz rf power not only decreased electron temperature but also improved both the plasma uniformity and the process uniformity measured by photoresist etching. Therefore, by using the dual frequency to the U-shaped ICP source, not only the plasma density but also plasma uniformity could be improved in addition to the decrease of possible damage to the substrate. PMID:26726573

  10. Voltage distribution over capacitively coupled plasma electrode for atmospheric-pressure plasma generation

    PubMed Central

    2013-01-01

    When capacitively coupled plasma (CCP) is used to generate large-area plasma, the standing wave effect becomes significant, which results in the hindering of the uniform plasma process such as in a plasma etcher or plasma chemical vapor deposition. In this study, the transmission line modeling method is applied to calculate the voltage distribution over atmospheric-pressure CCP electrodes with the size of 1 m × 0.2 m. The measured plasma impedance in our previous study was used in the present calculation. The results of the calculations clearly showed the effects of excitation frequency and the impedance of the plasma on the form of the voltage distribution caused by the standing wave effect. In the case of 150 MHz frequency, the standing wave effect causes a drastic change in the voltage distribution via plasma ignition; however, the change is small for 13.56 MHz. It was also clarified that the power application position is important for obtaining a uniform voltage distribution. PMID:23634893

  11. Diagnostics for transport phenomena in strongly coupled dusty plasmas

    NASA Astrophysics Data System (ADS)

    Goree, J.; Liu, Bin; Feng, Yan

    2013-12-01

    Experimental methods are described for determining transport coefficients in a strongly coupled dusty plasma. A dusty plasma is a mixture of electrons, ions and highly charged microspheres. Due to their large charges, the microspheres are a strongly coupled plasma, and they arrange themselves like atoms in a crystal or liquid. Using a video microscopy diagnostic, with laser illumination and a high speed video camera, the microspheres are imaged. Moment-method image analysis then yields the microspheres' positions and velocities. In one approach, these data in the particle paradigm are converted into the continuum paradigm by binning, yielding hydrodynamic quantities like number density, flow velocity and temperature that are recorded on a grid. To analyze continuum data for two-dimensional laboratory experiments, they are fit to the hydrodynamic equations, yielding the transport coefficients for shear viscosity and thermal conductivity. In another approach, the original particle data can be used to obtain the diffusion and viscosity coefficients, as is discussed in the context of future three-dimensional microgravity experiments.

  12. Turbulence in strongly coupled dusty plasmas using generalized hydrodynamic description

    SciTech Connect

    Tiwari, Sanat Kumar; Dharodi, Vikram Singh; Das, Amita; Patel, Bhavesh G.; Kaw, Predhiman

    2015-02-15

    The properties of decaying turbulence have been studied with the help of a Generalized Hydrodynamic (GHD) fluid model in the context of strongly coupled dusty plasma medium in two dimensions. The GHD model treats the strongly coupled dusty plasma system as a visco-elastic medium. The incompressible limit of the GHD model is considered here. The studies carried out here are, however, applicable to a wider class of visco-elastic systems, and are not merely confined to the dusty plasma medium. Our simulations studies show that an initial spectrum that is confined in a limited domain of wave numbers becomes broad, even when the Reynold's number is much less than the critical value required for the onset of turbulence in Newtonian fluids. This is a signature of elastic turbulence, where Weissenberg's number also plays an important role on the onset of turbulence. This feature has been observed in several experiments. It is also shown that the existence of memory relaxation time parameter and the transverse shear wave inhibit the normal process (for 2-D systems) of inverse spectral cascade in this case. A detailed simulation study has been carried out for the understanding of this inhibition.

  13. Negative ion density in inductively coupled chlorine plasmas

    SciTech Connect

    Hebner, G.A.

    1995-12-31

    The negative ion density in radio-frequency (rf) inductively-coupled chlorine discharges has been inferred using laser photodetachment spectroscopy. A Gaseous Electronics Conference (GEC) rf Reference Cell with an inductively coupled plasma source was used to produce the plasma. For this experiment, the chlorine pressure was between 20 and 50 mTorr and the rf power into the plasma was 150 to 250 Watts at 13.56 MHz. Light from a frequency quadrupled Nd:YAG laser (266 nm) was used to photodetach electrons from Cl{sup {minus}}. The time dependent excess electron density was then detected by a microwave interferometer operating at 80 GHz. Based upon the cross section for photodetachment and the measurement geometry, negative ion densities can be calculated. The inferred negative ion densities are at least an order of magnitude higher than the steady state electron density over the parameter space investigated. The dependence of the negative ion density on rf power, gas pressure, flow rate and rf phase will be discussed.

  14. Quasilocalized charge approximation in strongly coupled plasma physics

    SciTech Connect

    Golden, Kenneth I.; Kalman, Gabor J.

    2000-01-01

    The quasilocalized charge approximation (QLCA) was proposed in 1990 [G. Kalman and K. I. Golden, Phys. Rev. A 41, 5516 (1990)] as a formalism for the analysis of the dielectric response tensor and collective mode dispersion in strongly coupled Coulomb liquids. The approach is based on a microscopic model in which the charges are quasilocalized on a short-time scale in local potential fluctuations. The authors review the application of the QLC approach to a variety of systems which can exhibit strongly coupled plasma behavior: (i) the one-component plasma (OCP) model in three dimensions (e.g., laser-cooled trapped ions) and (ii) in two dimensions (e.g., classical 2D electron liquid trapped above the free surface of liquid helium), (iii) binary ionic mixture in a neutralizing uniform background (e.g., carbon-oxygen white dwarf interiors), (iv) charged particle bilayers (e.g., semiconductor electronic bilayers), and (v) charged particles in polarizable background (e.g., laboratory dusty plasmas). (c) 2000 American Institute of Physics.

  15. Structural Analysis of an Avr4 Effector Ortholog Offers Insight into Chitin Binding and Recognition by the Cf-4 Receptor.

    PubMed

    Kohler, Amanda C; Chen, Li-Hung; Hurlburt, Nicholas; Salvucci, Anthony; Schwessinger, Benjamin; Fisher, Andrew J; Stergiopoulos, Ioannis

    2016-08-01

    Chitin is a key component of fungal cell walls and a potent inducer of innate immune responses. Consequently, fungi may secrete chitin-binding lectins, such as the Cf-Avr4 effector protein from the tomato pathogen Cladosporium fulvum, to shield chitin from host-derived chitinases during infection. Homologs of Cf-Avr4 are found throughout Dothideomycetes, and despite their modest primary sequence identity, many are perceived by the cognate tomato immune receptor Cf-4. Here, we determined the x-ray crystal structure of Pf-Avr4 from the tomato pathogen Pseudocercospora fuligena, thus providing a three-dimensional model of an Avr4 effector protein. In addition, we explored structural, biochemical, and functional aspects of Pf-Avr4 and Cf-Avr4 to further define the biology of core effector proteins and outline a conceptual framework for their pleiotropic recognition by single immune receptors. We show that Cf-Avr4 and Pf-Avr4 share functional specificity in binding (GlcNAc)6 and in providing protection against plant- and microbial-derived chitinases, suggesting a broader role beyond deregulation of host immunity. Furthermore, structure-guided site-directed mutagenesis indicated that residues in Pf-Avr4 important for binding chitin do not directly influence recognition by Cf-4 and further suggested that the property of recognition is structurally separated or does not fully overlap with the virulence function of the effector. PMID:27401545

  16. Measured pressure distributions, aerodynamic coefficients and shock shapes on blunt bodies at incidence in hypersonic air and CF4

    NASA Technical Reports Server (NTRS)

    Miller, C. G., III

    1982-01-01

    Pressure distributions, aerodynamic coefficients, and shock shapes were measured on blunt bodies of revolution in Mach 6 CF4 and in Mach 6 and Mach 10 air. The angle of attack was varied from 0 deg to 20 deg in 4 deg increments. Configurations tested were a hyperboloid with an asymptotic angle of 45 deg, a sonic-corner paraboloid, a paraboloid with an angle of 27.6 deg at the base, a Viking aeroshell generated in a generalized orthogonal coordinate system, and a family of cones having a 45 deg half-angle with spherical, flattened, concave, and cusp nose shapes. Real-gas effects were simulated for the hperboloid and paraboloid models at Mach 6 by testing at a normal-shock density ratio of 5.3 in air and 12 CF4. Predictions from simple theories and numerical flow field programs are compared with measurement. It is anticipated that the data presented in this report will be useful for verification of analytical methods for predicting hypersonic flow fields about blunt bodies at incidence.

  17. Multistage coupling of independent laser-plasma accelerators.

    PubMed

    Steinke, S; van Tilborg, J; Benedetti, C; Geddes, C G R; Schroeder, C B; Daniels, J; Swanson, K K; Gonsalves, A J; Nakamura, K; Matlis, N H; Shaw, B H; Esarey, E; Leemans, W P

    2016-02-11

    Laser-plasma accelerators (LPAs) are capable of accelerating charged particles to very high energies in very compact structures. In theory, therefore, they offer advantages over conventional, large-scale particle accelerators. However, the energy gain in a single-stage LPA can be limited by laser diffraction, dephasing, electron-beam loading and laser-energy depletion. The problem of laser diffraction can be addressed by using laser-pulse guiding and preformed plasma waveguides to maintain the required laser intensity over distances of many Rayleigh lengths; dephasing can be mitigated by longitudinal tailoring of the plasma density; and beam loading can be controlled by proper shaping of the electron beam. To increase the beam energy further, it is necessary to tackle the problem of the depletion of laser energy, by sequencing the accelerator into stages, each powered by a separate laser pulse. Here, we present results from an experiment that demonstrates such staging. Two LPA stages were coupled over a short distance (as is needed to preserve the average acceleration gradient) by a plasma mirror. Stable electron beams from a first LPA were focused to a twenty-micrometre radius--by a discharge capillary-based active plasma lens--into a second LPA, such that the beams interacted with the wakefield excited by a separate laser. Staged acceleration by the wakefield of the second stage is detected via an energy gain of 100 megaelectronvolts for a subset of the electron beam. Changing the arrival time of the electron beam with respect to the second-stage laser pulse allowed us to reconstruct the temporal wakefield structure and to determine the plasma density. Our results indicate that the fundamental limitation to energy gain presented by laser depletion can be overcome by using staged acceleration, suggesting a way of reaching the electron energies required for collider applications. PMID:26829223

  18. Tiling analysis of melting in strongly-coupled dusty plasma*

    NASA Astrophysics Data System (ADS)

    Suranga Ruhunusiri, W. D.; Feng, Yan; Liu, Bin; Goree, John

    2010-11-01

    A dusty plasma is an ionized gas containing micron-size particles of solid matter, which collect electrons and ions and become negatively charged. Due to large Coulomb interparticle potential energies, the microparticles represent a strongly-coupled plasma. In the absence of an external disturbance, the microparticles self-organize, arranging themselves in a crystalline lattice, due to their Coulomb interaction. If kinetic energy is added, the arrangement of microparticles becomes disordered, like atoms in a liquid. This melting process can be characterized by a proliferation of defects, which previous experimenters measured using Voronoi analysis. Here we use another method, tiling [1] to quantify defects. We demonstrate this method, which until now has been used only in simulations, in a dusty plasma experiment. A single layer of 4.83 μm polymer microparticles was electrically levitated in a glow discharge argon plasma. The lattice was melted by applying random kicks to the micoparticles from rastered laser beams. We imaged the particle positions and computed the corresponding tiling for both the crystalline lattice and liquid states. [1] Matthew A. Glaser, Phys. Rev A 41, 4585 (1990) ^*Work supported by NSF and NASA.

  19. Strongly coupled plasma with electric and magnetic charges

    SciTech Connect

    Liao Jinfeng; Shuryak, Edward

    2007-05-15

    A number of theoretical and lattice results lead us to believe that quark-gluon plasma not too far from T{sub c} contains not only electrically charged quasiparticles - quarks and gluons - but magnetically charged ones--monopoles and dyons--as well. Although binary systems such as charge-monopole and charge-dyon were considered in detail before in both classical and quantum settings, this is the first study of coexisting electric and magnetic particles in a many-body context. We perform a molecular dynamics study of strongly coupled plasmas with {approx}1000 particles and differing fractions of magnetic charge. Correlation functions and Kubo formulas lead to transport properties such as the diffusion constant, the shear viscosity, and electric conductivity: We compare the first two with empirical data from RHIC experiments as well as with results from anti-de-Sitter space/conformal field theory correspondence. We also study a number of collective excitations in these systems.

  20. Imaginary potential of heavy quarkonia moving in strongly coupled plasma

    NASA Astrophysics Data System (ADS)

    Ali-Akbari, M.; Giataganas, D.; Rezaei, Z.

    2014-10-01

    The melting of a heavy quark-antiquark bound state depends on the screening phenomena associated with the binding energy, as well as scattering phenomena associated with the imaginary part of the potential. We study the imaginary part of the static potential of heavy quarkonia moving in the strongly coupled plasma. The imaginary potential dependence on the velocity of the traveling bound states is calculated. Nonzero velocity leads to an increase of the absolute value of the imaginary potential. The enhancement is stronger when the quarkonia move orthogonal to the quark-gluon plasma maximizing the flux between the pair. Moreover, we estimate the thermal width of the moving bound state and find it enhanced compared to the static one. Our results imply that the moving quarkonia dissociate easier than the static ones in agreement with the expectations.

  1. The energetic coupling of scales in gyrokinetic plasma turbulence

    SciTech Connect

    Teaca, Bogdan; Jenko, Frank

    2014-07-15

    In magnetized plasma turbulence, the couplings of perpendicular spatial scales that arise due to the nonlinear interactions are analyzed from the perspective of the free-energy exchanges. The plasmas considered here, with appropriate ion or electron adiabatic electro-neutrality responses, are described by the gyrokinetic formalism in a toroidal magnetic geometry. Turbulence develops due to the electrostatic fluctuations driven by temperature gradient instabilities, either ion temperature gradient (ITG) or electron temperature gradient (ETG). The analysis consists in decomposing the system into a series of scale structures, while accounting separately for contributions made by modes possessing special symmetries (e.g., the zonal flow modes). The interaction of these scales is analyzed using the energy transfer functions, including a forward and backward decomposition, scale fluxes, and locality functions. The comparison between the ITG and ETG cases shows that ETG turbulence has a more pronounced classical turbulent behavior, exhibiting a stronger energy cascade, with implications for gyrokinetic turbulence modeling.

  2. Ion deposition by inductively coupled plasma mass spectrometry

    SciTech Connect

    Hu, K.; Houk, R.S.

    1996-03-01

    An atmospheric pressure inductively coupled plasma (ICP) is used with a quadrupole mass spectrometer (MS) for ion deposition. The deposited element is introduced as a nebulized aqueous solution. Modifications to the ICP-MS device allow generation and deposition of a mass-resolved beam of {sup 165}Ho{sup +} at 5{times}10{sup 12} ions s{sup {minus}1}. The ICP is a universal, multielement ion source that can potentially be used for applications such as deposition of mixtures of widely varying stoichiometry or of alternating layers of different elements. {copyright} {ital 1996 American Vacuum Society}

  3. Nonlinear wave propagation in a strongly coupled collisional dusty plasma

    SciTech Connect

    Ghosh, Samiran; Gupta, Mithil Ranjan; Chakrabarti, Nikhil; Chaudhuri, Manis

    2011-06-15

    The propagation of a nonlinear low-frequency mode in a strongly coupled dusty plasma is investigated using a generalized hydrodynamical model. For the well-known longitudinal dust acoustic mode a standard perturbative approach leads to a Korteweg-de Vries (KdV) soliton. The strong viscoelastic effect, however, introduced a nonlinear forcing and a linear damping in the KdV equation. This novel equation is solved analytically to show a competition between nonlinear forcing and dissipative damping. The physical consequence of such a solution is also sketched.

  4. Nonlinear wave propagation in a strongly coupled collisional dusty plasma.

    PubMed

    Ghosh, Samiran; Gupta, Mithil Ranjan; Chakrabarti, Nikhil; Chaudhuri, Manis

    2011-06-01

    The propagation of a nonlinear low-frequency mode in a strongly coupled dusty plasma is investigated using a generalized hydrodynamical model. For the well-known longitudinal dust acoustic mode a standard perturbative approach leads to a Korteweg-de Vries (KdV) soliton. The strong viscoelastic effect, however, introduced a nonlinear forcing and a linear damping in the KdV equation. This novel equation is solved analytically to show a competition between nonlinear forcing and dissipative damping. The physical consequence of such a solution is also sketched. PMID:21797497

  5. Fission Yield Measurements by Inductively Coupled Plasma Mass-Spectrometry

    SciTech Connect

    Irina Glagolenko; Bruce Hilton; Jeffrey Giglio; Daniel Cummings; Karl Grimm; Richard McKnight

    2009-11-01

    Correct prediction of the fission products inventory in irradiated nuclear fuels is essential for accurate estimation of fuel burnup, establishing proper requirements for spent fuel transportation and storage, materials accountability and nuclear forensics. Such prediction is impossible without accurate knowledge of neutron induced fission yields. Unfortunately, the accuracy of the fission yields reported in the ENDF/B-VII.0 library is not uniform across all of the data and much of the improvement is desired for certain isotopes and fission products. We discuss our measurements of cumulative fission yields in nuclear fuels irradiated in thermal and fast reactor spectra using Inductively Coupled Plasma Mass Spectrometry.

  6. Nonlinear wave propagation in strongly coupled dusty plasmas.

    PubMed

    Veeresha, B M; Tiwari, S K; Sen, A; Kaw, P K; Das, A

    2010-03-01

    The nonlinear propagation of low-frequency waves in a strongly coupled dusty plasma medium is studied theoretically in the framework of the phenomenological generalized hydrodynamic (GH) model. A set of simplified model nonlinear equations are derived from the original nonlinear integrodifferential form of the GH model by employing an appropriate physical ansatz. Using standard perturbation techniques characteristic evolution equations for finite small amplitude waves are then obtained in various propagation regimes. The influence of viscoelastic properties arising from dust correlation contributions on the nature of nonlinear solutions is discussed. The modulational stability of dust acoustic waves to parallel perturbation is also examined and it is shown that dust compressibility contributions influenced by the Coulomb coupling effects introduce significant modification in the threshold and range of the instability domain. PMID:20365882

  7. Nonlinear wave propagation in strongly coupled dusty plasmas

    SciTech Connect

    Veeresha, B. M.; Tiwari, S. K.; Sen, A.; Kaw, P. K.; Das, A.

    2010-03-15

    The nonlinear propagation of low-frequency waves in a strongly coupled dusty plasma medium is studied theoretically in the framework of the phenomenological generalized hydrodynamic (GH) model. A set of simplified model nonlinear equations are derived from the original nonlinear integrodifferential form of the GH model by employing an appropriate physical ansatz. Using standard perturbation techniques characteristic evolution equations for finite small amplitude waves are then obtained in various propagation regimes. The influence of viscoelastic properties arising from dust correlation contributions on the nature of nonlinear solutions is discussed. The modulational stability of dust acoustic waves to parallel perturbation is also examined and it is shown that dust compressibility contributions influenced by the Coulomb coupling effects introduce significant modification in the threshold and range of the instability domain.

  8. Instabilities in fluorocarbon ICP plasmas

    NASA Astrophysics Data System (ADS)

    Booth, Jean-Paul; Abada, Hana

    2000-10-01

    Several recent studies (Lieberman and al(M. A. Lieberman, A. J. Lichtenberg and A. M. Marakhtanov, App. Phys. Vol75,3617 (1999)), Tuszewski(M. Tuszewski, J. Appl. Phys. 79, 8967 (1996))) have shown the presence of instabilities in low pressure inductively coupled discharges with electronegative gases (O_2, Ar/SF_6). Lieberman and al^1 have proposed an explanation for this effect in terms of electon attachment processes causing an oscillation between capacitive and inductive coupling modes. We have observed similar instabilities in ICP fluorocarbon plasmas (CF_4, C_2F_6, CHF_3) by observing the optical emission from the plasma. In CF4 plasmas, the optical emission is modulated by up to 90% at frequencies 200-1 kHz at 1-20 mtorr with rf powers of 300 W and 500W. We have also observed an interesting phenomenon whereby inductive/capacitive oscillations occur during several hundreds of ms, in between periods of stable capactive operation lasting several hudreds of ms.

  9. Modeling viscosity and diffusion of plasma mixtures across coupling regimes

    NASA Astrophysics Data System (ADS)

    Arnault, Philippe

    2014-10-01

    Viscosity and diffusion of plasma for pure elements and multicomponent mixtures are modeled from the high-temperature low-density weakly coupled regime to the low-temperature high-density strongly coupled regime. Thanks to an atom in jellium modeling, the effect of electron screening on the ion-ion interaction is incorporated through a self-consistent definition of the ionization. This defines an effective One Component Plasma, or an effective Binary Ionic Mixture, that is representative of the strength of the interaction. For the viscosity and the interdiffusion of mixtures, approximate kinetic expressions are supplemented by mixing laws applied to the excess viscosity and self-diffusion of pure elements. The comparisons with classical and quantum molecular dynamics results reveal deviations in the range 20--40% on average with almost no predictions further than a factor of 2 over many decades of variation. Applications in the inertial confinement fusion context could help in predicting the growth of hydrodynamic instabilities.

  10. Low-pressure water-cooled inductively coupled plasma torch

    DOEpatents

    Seliskar, Carl J.; Warner, David K.

    1988-12-27

    An inductively coupled plasma torch is provided which comprises an inner tube, including a sample injection port to which the sample to be tested is supplied and comprising an enlarged central portion in which the plasma flame is confined; an outer tube surrounding the inner tube and containing water therein for cooling the inner tube, the outer tube including a water inlet port to which water is supplied and a water outlet port spaced from the water inlet port and from which water is removed after flowing through the outer tube; and an r.f. induction coil for inducing the plasma in the gas passing into the tube through the sample injection port. The sample injection port comprises a capillary tube including a reduced diameter orifice, projecting into the lower end of the inner tube. The water inlet is located at the lower end of the outer tube and the r.f. heating coil is disposed around the outer tube above and adjacent to the water inlet.

  11. Low-pressure water-cooled inductively coupled plasma torch

    DOEpatents

    Seliskar, C.J.; Warner, D.K.

    1984-02-16

    An inductively coupled plasma torch is provided which comprises an inner tube, including a sample injection port to which the sample to be tested is supplied and comprising an enlarged central portion in which the plasma flame is confined; an outer tube surrounding the inner tube and containing water therein for cooling the inner tube, the outer tube including a water inlet port to which water is supplied and a water outlet port spaced from the water inlet port and from which water is removed after flowing through the outer tube; and an rf induction coil for inducing the plasma in the gas passing into the tube through the sample injection port. The sample injection port comprises a capillary tube including a reduced diameter orifice, projecting into the lower end of the inner tube. The water inlet is located at the lower end of the outer tube and the rf heating coil is disposed around the outer tube above and adjacent to the water inlet.

  12. Complex (dusty) plasmas-kinetic studies of strong coupling phenomena

    SciTech Connect

    Morfill, Gregor E.; Ivlev, Alexei V.; Thomas, Hubertus M.

    2012-05-15

    'Dusty plasmas' can be found almost everywhere-in the interstellar medium, in star and planet formation, in the solar system in the Earth's atmosphere, and in the laboratory. In astrophysical plasmas, the dust component accounts for only about 1% of the mass, nevertheless this component has a profound influence on the thermodynamics, the chemistry, and the dynamics. Important physical processes are charging, sputtering, cooling, light absorption, and radiation pressure, connecting electromagnetic forces to gravity. Surface chemistry is another important aspect. In the laboratory, there is great interest in industrial processes (e.g., etching, vapor deposition) and-at the fundamental level-in the physics of strong coupling phenomena. Here, the dust (or microparticles) are the dominant component of the multi-species plasma. The particles can be observed in real time and space, individually resolved at all relevant length and time scales. This provides an unprecedented means for studying self-organisation processes in many-particle systems, including the onset of cooperative phenomena. Due to the comparatively large mass of the microparticles (10{sup -12}to10{sup -9}g), precision experiments are performed on the ISS. The following topics will be discussed: Phase transitions, phase separation, electrorheology, flow phenomena including the onset of turbulence at the kinetic level.

  13. Dusty Plasmas - Kinetic Studies of Strong Coupling Phenomena

    NASA Astrophysics Data System (ADS)

    Morfill, Gregor

    2011-10-01

    ``Dusty plasmas'' can be found almost everywhere - in the interstellar medium, in star and planet formation, in the solar system in the Earth's atmosphere and in the laboratory. In astrophysical plasmas the dust component accounts for only about 1% of the mass, nevertheless this component has a profound influence on the thermodynamics, the chemistry and the dynamics. Important physical processes are charging, sputtering, cooling, light absorption and radiation pressure, connecting electromagnetic forces to gravity. Surface chemistry is another important aspect. In the laboratory there is great interest in industrial processes (e.g. etching, vapor deposition) and at the fundamental physics level - the main topic here - the study of strong coupling phenomena. Here the dust (or microparticles) are the dominant component of the multi-species plasma. The particles can be observed in real time and pace, individually resolved at all relevant length and time scales. This provides an unprecedented means for studying self-organisation processes in many particle systems including the onset of cooperative phenomena. Due to the comparatively large mass of the microparticles (10-12 to 10-9 g) precision experiments are performed on the ISS. The following topics will be discussed: Phase transitions, phase separation, electrorheology, flow phenomena including the onset of turbulence at the kinetic level.

  14. Comparison between experiment and simulation for argon inductively coupled plasma

    SciTech Connect

    Gao Fei; Zhao Shuxia; Li Xiaosong; Wang Younian

    2009-11-15

    In order to include the nonlocal characteristics of electrons and investigate the inductively coupled plasma (ICP) resources more completely, we have developed a hybrid Monte Carlo (MC)/fluid hybrid model and calculated the axial and radial distributions of electron density, electron temperature, plasma potential, and electron energy distribution functions (EEDFs) of Ar discharge in a planar ICP. Furthermore, to make the model more practical, we still incorporate the effects of metastable atoms, whose sets of rate coefficients and density are, respectively, calculated through the electron MC part and fluid module. Besides, the corresponding Langmuir probe measurements are used to compare these data to validate the simulated results. Under all the selected discharge powers and pressures, the theoretically simulated and experimentally measured quantity profiles agree reasonably with each other, embodied in the generally identical magnitude ranges and spatial distributions. Furthermore, the interpretations about their detailed differences are given, which are based on the designs of both experimental schematic and model configuration. The analysis implements that the inclusions of electron-electron collision and a neutral density distribution into the hybrid model are likely to improve the comparison between the model predictions and experiment diagnostics. Furthermore, the evolution of plasma parameters and EEDFs with discharge conditions is discussed.

  15. Temperature evolution of strongly coupled electron-ion plasmas

    NASA Astrophysics Data System (ADS)

    Tiwari, Sanat Kumar; Shaffer, Nathaniel; Baalrud, Scott D.

    2015-11-01

    Molecular dynamics simulations of electron-ion plasmas have been carried out, focusing on the classical strongly coupled regime relevant to ultracold neutral plasmas. The interaction of oppositely charged species is modeled using a pseudopotential with a repulsive core at a specified distance ɛ in units of average interparticle spacing. This parameter distinguishes classical from quantum statistical regimes. Simulations are initiated with an equilibration phase in which ions and electrons are held to fixed independent temperatures using a thermostat. Subsequently, the thermostats are removed and the system is allowed to evolve. Two effects are observed: (1) For sufficiently small values of ɛ, the plasma rapidly heats, (2) electrons and ions equilibrate on a longer time scale. The critical ɛ value for the onset of heating and the temperature equilibration rate are compared with existing theory. Excess pressure is calculated in each case based on the equilibrium radial distribution functions obtained during the equilibration phase. The Γ - ɛ phase space is explored, revealing qualitative differences in the temperature evolution due to electron-ion interactions in the classical and quantum regimes. The authors gratefully acknowledge support from NSF grant PHY-1453736.

  16. The Weibel instability in a strongly coupled plasma

    SciTech Connect

    Mahdavi, M. Khanzadeh, H.

    2014-06-15

    In this paper, the growth rate of the Weibel instability is calculated for an energetic relativistic electron beam penetrated into a strongly coupled plasma, where the collision effects of background electron-ion scattering play an important role in equations. In order to calculate the growth rate of the Weibel instability, two different models of anisotropic distribution function are used. First, the distribution of the plasma and beam electrons considered as similar forms of bi-Maxwellian distribution. Second, the distribution functions of the plasma electrons and the beam electrons follows bi-Maxwellian and delta-like distributions, respectively. The obtained results show that the collision effect decreases the growth rate in two models. When the distribution function of electrons beam is in bi-Maxwellian form, the instability growth rate is greater than where the distribution function of beam electrons is in delta-like form, because, the anisotropic temperature for bi-Maxwellian distribution function in velocity space is greater than the delta-like distribution function.

  17. Matrix effects in inductively coupled plasma mass spectrometry

    SciTech Connect

    Chen, Xiaoshan

    1995-07-07

    The inductively coupled plasma is an electrodeless discharge in a gas (usually Ar) at atmospheric pressure. Radio frequency energy generated by a RF power source is inductively coupled to the plasma gas through a water cooled load coil. In ICP-MS the {open_quotes}Fassel{close_quotes} TAX quartz torch commonly used in emission is mounted horizontally. The sample aerosol is introduced into the central flow, where the gas kinetic temperature is about 5000 K. The aerosol is vaporized, atomized, excited and ionized in the plasma, and the ions are subsequently extracted through two metal apertures (sampler and skimmer) into the mass spectrometer. In ICP-MS, the matrix effects, or non-spectroscopic interferences, can be defined as the type of interferences caused by dissolved concomitant salt ions in the solution. Matrix effects can be divided into two categories: (1) signal drift due to the deposition of solids on the sampling apertures; and/or (2) signal suppression or enhancement by the presence of the dissolved salts. The first category is now reasonably understood. The dissolved salts, especially refractory oxides, tend to deposit on the cool tip of the sampling cone. The clogging of the orifices reduces the ion flow into the ICP-MS, lowers the pressure in the first stage of ICP-MS, and enhances the level of metal oxide ions. Because the extent of the clogging increases with the time, the signal drifts down. Even at the very early stage of the development of ICP-MS, matrix effects had been observed. Houk et al. found out that the ICP-MS was not tolerant to solutions containing significant amounts of dissolved solids.

  18. Diagnostics of Argon Inductively Coupled Plasma and Dielectric Barrier Discharge Plasma by Optical Emission Spectroscopy

    NASA Astrophysics Data System (ADS)

    Zhang, Jia-liang; Yu, Shi-ji; Ma, Teng-cai; Deng, Xin-lu

    2001-08-01

    An experimental setup was built up to carry out radio frequency (RF) inductively coupled plasma (ICP) and dielectric barrier discharge (DBD), and to depict the optical emission spectra (OES) of the discharges. OES from argon ICP and DBD plasmas in visible and near ultraviolet region were measured. For argon ICP, the higher RF power input (higher than 500 W for our machine), the higher degree of argon plasma ionization. But that doesn't mean a higher mean electron energy. With the increase in the power input, the mean electron energy increases slightly, whereas the density of electron increases apparently. Or, the contrary, argon DBD discharge behaves in the manner of a pulsed DC discharge on optical emission spectroscopy and V-I characteristics. DBD current is composed of a series of pulses equally spaced in temporal domain. The kinetics of DBD emission strength is mainly governed by the frequency of the current pulse.

  19. Feedback control of plasma electron density and ion energy in an inductively coupled plasma etcher

    SciTech Connect

    Lin Chaung; Leou, K.-C.; Huang, H.-M.; Hsieh, C.-H.

    2009-01-15

    Here the authors report the development of a fuzzy logic based feedback control of the plasma electron density and ion energy for high density plasma etch process. The plasma electron density was measured using their recently developed transmission line microstrip microwave interferometer mounted on the chamber wall, and the rf voltage was measured by a commercial impedance meter connected to the wafer stage. The actuators were two 13.56 MHz rf power generators which provided the inductively coupled plasma power and bias power, respectively. The control system adopted the fuzzy logic control algorithm to reduce frequent actuator action resulting from measurement noise. The experimental results show that the first wafer effect can be eliminated using closed-loop control for both poly-Si and HfO{sub 2} etching. In particular, for the HfO2 etch, the controlled variables in this work were much more effective than the previous one where ion current was controlled, instead of the electron density. However, the pressure disturbance effect cannot be reduced using plasma electron density feedback.

  20. Etch Process Sensitivity To An Inductively Coupled Plasma Etcher Treated With Fluorine-Based Plasma

    NASA Astrophysics Data System (ADS)

    Xu, Songlin; Sun, Zhiwen; Qian, Xueyu; Yin, Gerald

    1997-10-01

    Significant etch rate drop after the treatment of an etch chamber with Fluorine-based plasma has been found for some silicon etch processes on an inductively coupled plasma reactor, which might cause problems in IC production line once the etch chamber runs alternative processes with F-based and F-free chemistry, or needs frequent cleaning with F-plasma. In this work, a systematic study of the root cause of process sensitivity to the etch chamber treated with F-plasma has been conducted. The experimental results show that pressure is a key factor to affect the etch rate drop. Processes at high pressure are more sensitive than those at low pressure because the quenching of neutral reactive species becomes more severe after the F-treatment. O2 addition also increases the etch rate sensitivity, basically due to higher O2(subscript: )concentration after F-treatment which enhances the oxidation of silicon. The EDX and XPS elemental analysis of the chamber interior wall reveals a significant composition change after the interaction with F-plasma, the altered surface might accelerate the recombination of free radical species.

  1. A tightly coupled non-equilibrium model for inductively coupled radio-frequency plasmas

    SciTech Connect

    Munafò, A. Alfuhaid, S. A. Panesi, M.; Cambier, J.-L.

    2015-10-07

    The objective of the present work is the development of a tightly coupled magneto-hydrodynamic model for inductively coupled radio-frequency plasmas. Non Local Thermodynamic Equilibrium (NLTE) effects are described based on a hybrid State-to-State approach. A multi-temperature formulation is used to account for thermal non-equilibrium between translation of heavy-particles and vibration of molecules. Excited electronic states of atoms are instead treated as separate pseudo-species, allowing for non-Boltzmann distributions of their populations. Free-electrons are assumed Maxwellian at their own temperature. The governing equations for the electro-magnetic field and the gas properties (e.g., chemical composition and temperatures) are written as a coupled system of time-dependent conservation laws. Steady-state solutions are obtained by means of an implicit Finite Volume method. The results obtained in both LTE and NLTE conditions over a broad spectrum of operating conditions demonstrate the robustness of the proposed coupled numerical method. The analysis of chemical composition and temperature distributions along the torch radius shows that: (i) the use of the LTE assumption may lead to an inaccurate prediction of the thermo-chemical state of the gas, and (ii) non-equilibrium phenomena play a significant role close the walls, due to the combined effects of Ohmic heating and macroscopic gradients.

  2. A tightly coupled non-equilibrium model for inductively coupled radio-frequency plasmas

    NASA Astrophysics Data System (ADS)

    Munafò, A.; Alfuhaid, S. A.; Cambier, J.-L.; Panesi, M.

    2015-10-01

    The objective of the present work is the development of a tightly coupled magneto-hydrodynamic model for inductively coupled radio-frequency plasmas. Non Local Thermodynamic Equilibrium (NLTE) effects are described based on a hybrid State-to-State approach. A multi-temperature formulation is used to account for thermal non-equilibrium between translation of heavy-particles and vibration of molecules. Excited electronic states of atoms are instead treated as separate pseudo-species, allowing for non-Boltzmann distributions of their populations. Free-electrons are assumed Maxwellian at their own temperature. The governing equations for the electro-magnetic field and the gas properties (e.g., chemical composition and temperatures) are written as a coupled system of time-dependent conservation laws. Steady-state solutions are obtained by means of an implicit Finite Volume method. The results obtained in both LTE and NLTE conditions over a broad spectrum of operating conditions demonstrate the robustness of the proposed coupled numerical method. The analysis of chemical composition and temperature distributions along the torch radius shows that: (i) the use of the LTE assumption may lead to an inaccurate prediction of the thermo-chemical state of the gas, and (ii) non-equilibrium phenomena play a significant role close the walls, due to the combined effects of Ohmic heating and macroscopic gradients.

  3. Particle dynamics in a strongly-coupled dusty plasma

    NASA Astrophysics Data System (ADS)

    Goree, J.; Pieper, J. B.

    1996-11-01

    We have used video imaging to study the dynamics of 9 μ m plastic spheres suspended in low-power Krypton discharges. The spheres, which are highly charged and levitated by the electrode sheath, form a strongly-coupled system. Using a digitized series of images, we tracked individual particles and measured collective and random particle motions.footnote J. B. Pieper and J. Goree, submitted to PRL Dust acoustic waves were excited at <= 10 Hz and their dispersion relation verified. Fitting the measured and theoretical dispersion relations also give a measurement of the particle charge and the "linearized" Debye length. The temperature of random particle motion in the horizontal plane (parallel to the electrode) was measured to be 2-10 times room temperature and about 2 times the temperature in the vertical plane. It is proposed that the particles are heated by low-frequency (kHz) electrostatic plasma fluctuations. Work supported by NSF and NASA

  4. Particle dynamics in a strongly-coupled dusty plasma

    NASA Astrophysics Data System (ADS)

    Quinn, R. A.; Goree, J.; Pieper, J. B.

    1996-10-01

    We have used video imaging to study the dynamics of 9 μ m plastic spheres in low-power Krypton discharges. The spheres, which are highly charged and levitated by the electrode sheath, form a strongly-coupled system. Using a digitized series of images, we tracked individual particles and measured collective and random particle motions.footnote Pieper and Goree, submitted to PRL Dust acoustic waves were excited at <= 10 Hz and their dispersion relation verified. The temperature of random particle motion in the horizontal plane (parallel to the electrode) was measured to be 2-10 times room temperature and about 2 times the temperature in the vertical plane. It is proposed that the particles are heated by low-frequency (kHz) electrostatic plasma fluctuations.

  5. Transition of electron kinetics in weakly magnetized inductively coupled plasmas

    SciTech Connect

    Kim, Jin-Yong; Lee, Hyo-Chang; Kim, Young-Do; Chung, Chin-Wook; Kim, Young-Cheol

    2013-10-15

    Transition of the electron kinetics from nonlocal to local regime was studied in weakly magnetized solenoidal inductively coupled plasma from the measurement of the electron energy probability function (EEPF). Without DC magnetic field, the discharge property was governed by nonlocal electron kinetics at low gas pressure. The electron temperatures were almost same in radial position, and the EEPFs in total electron energy scale were radially coincided. However, when the DC magnetic field was applied, radial non-coincidence of the EEPFs in total electron energy scale was observed. The electrons were cooled at the discharge center where the electron heating is absent, while the electron temperature was rarely changed at the discharge boundary with the magnetic field. These changes show the transition from nonlocal to local electron kinetics and the transition is occurred when the electron gyration diameter was smaller than the skin depth. The nonlocal to local transition point almost coincided with the calculation results by using nonlocal parameter and collision parameter.

  6. Generation of strongly coupled plasmas by high power excimer laser

    NASA Astrophysics Data System (ADS)

    Zhu, Yongxiang; Liu, Jingru; Zhang, Yongsheng; Hu, Yun; Zhang, Jiyan; Zheng, Zhijian; Ye, Xisheng

    2013-05-01

    (ultraviolet). To generate strongly coupled plasmas (SCP) by high power excimer laser, an Au-CH-Al-CH target is used to make the Al sample reach the state of SCP, in which the Au layer transforms laser energy to X-ray that heating the sample by volume and the CH layers provides necessary constraints. With aid of the MULTI-1D code, we calculate the state of the Al sample and its relationship with peak intensity, width and wavelength of laser pulses. The calculated results suggest that an excimer laser with peak intensity of the magnitude of 1013W/cm2 and pulse width being 5ns - 10ns is suitable to generate SCP with the temperature being tens of eV and the density of electron being of the order of 1022/cm-3. Lasers with shorter wavelength, such as KrF laser, are preferable.

  7. Inductively Coupled Plasma Mass Spectrometry Uranium Error Propagation

    SciTech Connect

    Hickman, D P; Maclean, S; Shepley, D; Shaw, R K

    2001-07-01

    The Hazards Control Department at Lawrence Livermore National Laboratory (LLNL) uses Inductively Coupled Plasma Mass Spectrometer (ICP/MS) technology to analyze uranium in urine. The ICP/MS used by the Hazards Control Department is a Perkin-Elmer Elan 6000 ICP/MS. The Department of Energy Laboratory Accreditation Program requires that the total error be assessed for bioassay measurements. A previous evaluation of the errors associated with the ICP/MS measurement of uranium demonstrated a {+-} 9.6% error in the range of 0.01 to 0.02 {micro}g/l. However, the propagation of total error for concentrations above and below this level have heretofore been undetermined. This document is an evaluation of the errors associated with the current LLNL ICP/MS method for a more expanded range of uranium concentrations.

  8. Dust-acoustic shocks in strongly coupled dusty plasmas

    NASA Astrophysics Data System (ADS)

    Cousens, S. E.; Yaroshenko, V. V.; Sultana, S.; Hellberg, M. A.; Verheest, F.; Kourakis, I.

    2014-04-01

    Electrostatic dust-acoustic shock waves are investigated in a viscous, complex plasma consisting of dust particles, electrons, and ions. The system is modelled using the generalized hydrodynamic equations, with strong coupling between the dust particles being accounted for by employing the effective electrostatic temperature approach. Using a reductive perturbation method, it is demonstrated that this model predicts the existence of weakly nonlinear dust-acoustic shock waves, arising as solutions to Burgers's equation, in which the nonlinear forces are balanced by dissipative forces, in this case, associated with viscosity. The evolution and stability of dust-acoustic shocks is investigated via a series of numerical simulations, which confirms our analytical predictions on the shock characteristics.

  9. Quantum simulations of strongly coupled quark-gluon plasma

    SciTech Connect

    Filinov, V. S.; Ivanov, Yu. B.; Bonitz, M.; Levashov, P. R.; Fortov, V. E.

    2011-09-15

    A strongly coupled quark-gluon plasma (QGP) of heavy constituent quasiparticles is studied by a path-integral Monte-Carlo method. This approach is a quantum generalization of the model developed by B.A. Gelman, E.V. Shuryak, and I. Zahed. It is shown that this method is able to reproduce the QCD lattice equation of state and also yields valuable insight into the internal structure of the QGP. The results indicate that the QGP reveals liquid-like rather than gas-like properties. At temperatures just above the critical one it was found that bound quark-antiquark states still survive. These states are bound by effective string-like forces and turn out to be colorless. At the temperature as large as twice the critical one no bound states are observed. Quantum effects turned out to be of prime importance in these simulations.

  10. Electron heating in capacitively coupled RF plasmas: a unified scenario

    NASA Astrophysics Data System (ADS)

    Brinkmann, Ralf Peter

    2016-02-01

    Electron heating in radio-frequency capacitively coupled plasmas (RF-CCP) is studied from first principles. The starting points are the electron equations of continuity and motion, with ionization neglected but electric and pressure forces and elastic collisions with the neutral background taken into account. Poisson’s equation self-consistently calculates the electric field; the ion density is assumed as a given. Postulating that the Debye length {λ\\text{D}} is small compared to the sheath length scale l and the applied frequency {ω\\text{RF}} is small compared to the electron plasma frequency {ω\\text{pe}} , an asymptotic expansion in the smallness parameter ε ={λ\\text{D}}/l∼ {ω\\text{RF}}/{ω\\text{pe}} is conducted. As has been demonstrated before (Brinkmann 2015 Plasma Sources Sci. Technol. 24 064002), this ansatz gives an expression—the smooth step model (SSM)—which yields (i) the space charge field in the unipolar region, (ii) the generalized Ohmic field in the ambipolar region, and (iii) a smooth interpolation for the rapid transition in between. Using the SSM and formulas for the electron density and the electron flux, expressions for the electric force and the electric power density are established which hold up to O≤ft(ε \\right) . Integrating over the sheath and taking the phase average, a representation for the total dissipated power is found as a sum of four physically distinct contributions. All terms correspond to electron heating mechanisms which are (explicitly or implicitly) already known but were so far discussed only within mutually incompatible frameworks.

  11. Inductively coupled plasma etching of BZN thin films in SF6/Ar plasmas

    NASA Astrophysics Data System (ADS)

    Wang, Gang; Li, Ping; Zhang, Guojun; Li, Wei; Dai, Liping; Jiang, Jing

    2013-03-01

    Etching mechanisms and characteristics of bismuth zinc niobate (BZN) thin films were investigated in inductively coupled SF6/Ar plasmas. The influences of various etching parameters including the gas flow ratio, process pressure, and ICP power on the etching results were analyzed. It is found that the chemical etching with F radicals was more effective than the physical sputtering etching with Ar ions for the inductively coupled plasma etching of BZN thin films. The mechanism of ion assisted chemical etching of BZN thin films in SF6/Ar plasmas was proposed. A maximum etch rate of approximately 43.15 nm/min for the BZN thin film was obtained at the optimum etching conditions: 3/2 for the SF6/Ar gas flow ratio, 10 mTorr for the process pressure, and 600 W for the ICP power. The surface morphology of the etched BZN thin film was observed, where was smooth and clean and no post-etch residues were remained.

  12. Inductively Coupled Plasma Zoom-Time-of-Flight Mass Spectrometry

    NASA Astrophysics Data System (ADS)

    Dennis, Elise A.; Ray, Steven J.; Enke, Christie G.; Hieftje, Gary M.

    2016-03-01

    A zoom-time-of-flight mass spectrometer has been coupled to an inductively coupled plasma (ICP) ionization source. Zoom-time-of-flight mass spectrometry (zoom-TOFMS) combines two complementary types of velocity-based mass separation. Specifically, zoom-TOFMS alternates between conventional, constant-energy acceleration (CEA) TOFMS and energy-focused, constant-momentum acceleration (CMA) (zoom) TOFMS. The CMA mode provides a mass-resolution enhancement of 1.5-1.7× over CEA-TOFMS in the current, 35-cm ICP-zoom-TOFMS instrument geometry. The maximum resolving power (full-width at half-maximum) for the ICP-zoom-TOFMS instrument is 1200 for CEA-TOFMS and 1900 for CMA-TOFMS. The CMA mode yields detection limits of between 0.02 and 0.8 ppt, depending upon the repetition rate and integration time—compared with single ppt detection limits for CEA-TOFMS. Isotope-ratio precision is shot-noise limited at approximately 0.2% relative-standard deviation (RSD) for both CEA- and CMA-TOFMS at a 10 kHz repetition rate and an integration time of 3-5 min. When the repetition rate is increased to 43.5 kHz for CMA, the shot-noise limited, zoom-mode isotope-ratio precision is improved to 0.09% RSD for the same integration time.

  13. Dual Comb Raman Spectroscopy on Cesium Hyperfine Transitions-Toward a Stimulate Raman Spectrum on CF4 Molecule

    NASA Astrophysics Data System (ADS)

    Liu, Tze-Wei; Hsu, Yen-Chu; Cheng, Wang-Yau

    2015-06-01

    Raman spectroscopy is an important spectroscopic technique used in chemistry to provide a fingerprint by which molecules can be identified. It helps us to observe vibration- rotation, and other low-frequency modes in a system. Dual comb Raman spectroscopy allows measuring a wide bandwidth with high resolution in microseconds. The stimulate Raman spectroscopy had been performed in early days where the nonlinear conversion efficiency depended on laser peak power. Hence we propose an approach for rapidly resolving the Raman spectroscopy of CF4 molecule by two Ti:sapphire comb lasers. Our progress on this proposal will be presented in the conference. First, we have realized a compact dual Ti:sapphire comb laser system where the dual Ti:sapphire laser system possesses the specification of 1 GHz repetition rate. In our dual comb system, 1 GHz repetition rate, 100 kHz Δfrep and 2.4 THz optical filter are chosen according to the demands of our future works on spectroscopy. Therefore, the maximum mode number within free spectral range is 5*103, and the widest range of dual-comb based spectra in that each spectrum could be uniquely identified is 5 THz. The actual bandwidth is determined by the employed optical filter and is set to be 2.4 THz here, so that the corresponding data acquisition time is 10 μs. Secondly, since the identification of the tremendous spectral lines of CF4 molecule relies on a stable reference and a reliable data-retrieving system, we propose a first-step experiment on atomic system where the direct 6S-8S 822-nm two-photon absorption and 8S-6P3/2 (794 nm) enhanced stimulate Raman would be realized directly by using Ti:sapphire laser. We have successfully performed direct comb laser two-photon spectroscopy for both with and without middle-level enhanced. For the level enhanced two-photon spectrum, our experimental setup achieves Doppler-free spectrum and a record narrow linewidth (1 MHz). T.-W. Liu, C.-M. Wu, Y.-C. Hsu and W.-Y. Cheng, Appl. Phys. B

  14. Finite-Difference Solution for Laminar or Turbulent Boundary Layer Flow over Axisymmetric Bodies with Ideal Gas, CF4, or Equilibrium Air Chemistry

    NASA Technical Reports Server (NTRS)

    Hamilton, H. Harris, II; Millman, Daniel R.; Greendyke, Robert B.

    1992-01-01

    A computer code was developed that uses an implicit finite-difference technique to solve nonsimilar, axisymmetric boundary layer equations for both laminar and turbulent flow. The code can treat ideal gases, air in chemical equilibrium, and carbon tetrafluoride (CF4), which is a useful gas for hypersonic blunt-body simulations. This is the only known boundary layer code that can treat CF4. Comparisons with experimental data have demonstrated that accurate solutions are obtained. The method should prove useful as an analysis tool for comparing calculations with wind tunnel experiments and for making calculations about flight vehicles where equilibrium air chemistry assumptions are valid.

  15. Plasma surface kinetics studies of silicon dioxide etch process in inductively coupled fluorocarbon plasmas

    NASA Astrophysics Data System (ADS)

    Chang, Won-Seok; Yu, Dong-Hun; Cho, Deog-Gyun; Yook, Yeong-Geun; Chun, Poo-Reum; Lee, Se-Ah; Kwon, Deuk-Chul; Im, Yeon-Ho

    2013-09-01

    With continuous decrease of nanoscale design rule, plasma etching processes to form high aspect ratio contact hole still remains a challenge to overcome their inherent drawbacks such as bowing and twisted feature. Due to their complexities there still exist big gaps between current research status and predictable modeling of this process. To address this issue, we proposed a surface kinetic model of silicon nitride etch process under inductively coupled fluorocarbon plasmas. For this work, the cut-off probe and quadrapole mass spectroscopy were used for measuring electrical plasma properties, the ion and neutral radical species. Furthermore, the systematic surface analysis was performed to investigate the thickness and chemical bonding of polymer passivation layer during the etch process. The proposed semi-global surface kinetic model can consider deposition of polymer passivation layer and silicon nitride etching self-consistently. The predicted modeling results showed good agreement with experimental data. We believe that our research will provide valuable information to avoid the empirical development of plasma etching process.

  16. Characteristics of pulsed dual frequency inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Seo, Jin Seok; Kim, Kyoung Nam; Kim, Ki Seok; Kim, Tae Hyung; Yeom, Geun Young

    2015-01-01

    To control the plasma characteristics more efficiently, a dual antenna inductively coupled plasma (DF-ICP) source composed of a 12-turn inner antenna operated at 2 MHz and a 3-turn outer antenna at 13.56 MHz was pulsed. The effects of pulsing to each antenna on the change of plasma characteristics and SiO2 etch characteristics using Ar/C4F8 gas mixtures were investigated. When the duty percentage was decreased from continuous wave (CW) mode to 30% for the inner or outer ICP antenna, decrease of the average electron temperature was observed for the pulsing of each antenna. Increase of the CF2/F ratio was also observed with decreasing duty percentage of each antenna, indicating decreased dissociation of the C4F8 gas due to the decreased average electron temperature. When SiO2 etching was investigated as a function of pulse duty percentage, increase of the etch selectivity of SiO2 over amorphous carbon layer (ACL) was observed while decreasing the SiO2 etch rate. The increase of etch selectivity was related to the change of gas dissociation characteristics, as observed by the decrease of average electron temperature and consequent increase of the CF2/F ratio. The decrease of the SiO2 etch rate could be compensated for by using the rf power compensated mode, that is, by maintaining the same time-average rf power during pulsing, instead of using the conventional pulsing mode. Through use of the power compensated mode, increased etch selectivity of SiO2/ACL similar to the conventional pulsing mode could be observed without significant decrease of the SiO2 etch rate. Finally, by using the rf power compensated mode while pulsing rf powers to both antennas, the plasma uniformity over the 300 mm diameter substrate could be improved from 7% for the CW conditions to about around 3.3% with the duty percentage of 30%.

  17. Aerosol detection efficiency in inductively coupled plasma mass spectrometry

    DOE PAGESBeta

    Hubbard, Joshua A.; Zigmond, Joseph A.

    2016-03-02

    We used an electrostatic size classification technique to segregate particles of known composition prior to being injected into an inductively coupled plasma mass spectrometer (ICP-MS). Moreover, we counted size-segregated particles with a condensation nuclei counter as well as sampled with an ICP-MS. By injecting particles of known size, composition, and aerosol concentration into the ICP-MS, efficiencies of the order of magnitude aerosol detection were calculated, and the particle size dependencies for volatile and refractory species were quantified. Similar to laser ablation ICP-MS, aerosol detection efficiency was defined as the rate at which atoms were detected in the ICP-MS normalized bymore » the rate at which atoms were injected in the form of particles. This method adds valuable insight into the development of technologies like laser ablation ICP-MS where aerosol particles (of relatively unknown size and gas concentration) are generated during ablation and then transported into the plasma of an ICP-MS. In this study, we characterized aerosol detection efficiencies of volatile species gold and silver along with refractory species aluminum oxide, cerium oxide, and yttrium oxide. Aerosols were generated with electrical mobility diameters ranging from 100 to 1000 nm. In general, it was observed that refractory species had lower aerosol detection efficiencies than volatile species, and there were strong dependencies on particle size and plasma torch residence time. Volatile species showed a distinct transition point at which aerosol detection efficiency began decreasing with increasing particle size. This critical diameter indicated the largest particle size for which complete particle detection should be expected and agreed with theories published in other works. Aerosol detection efficiencies also displayed power law dependencies on particle size. Aerosol detection efficiencies ranged from 10-5 to 10-11. Free molecular heat and mass transfer theory was

  18. Aerosol detection efficiency in inductively coupled plasma mass spectrometry

    NASA Astrophysics Data System (ADS)

    Hubbard, Joshua A.; Zigmond, Joseph A.

    2016-05-01

    An electrostatic size classification technique was used to segregate particles of known composition prior to being injected into an inductively coupled plasma mass spectrometer (ICP-MS). Size-segregated particles were counted with a condensation nuclei counter as well as sampled with an ICP-MS. By injecting particles of known size, composition, and aerosol concentration into the ICP-MS, efficiencies of the order of magnitude aerosol detection were calculated, and the particle size dependencies for volatile and refractory species were quantified. Similar to laser ablation ICP-MS, aerosol detection efficiency was defined as the rate at which atoms were detected in the ICP-MS normalized by the rate at which atoms were injected in the form of particles. This method adds valuable insight into the development of technologies like laser ablation ICP-MS where aerosol particles (of relatively unknown size and gas concentration) are generated during ablation and then transported into the plasma of an ICP-MS. In this study, we characterized aerosol detection efficiencies of volatile species gold and silver along with refractory species aluminum oxide, cerium oxide, and yttrium oxide. Aerosols were generated with electrical mobility diameters ranging from 100 to 1000 nm. In general, it was observed that refractory species had lower aerosol detection efficiencies than volatile species, and there were strong dependencies on particle size and plasma torch residence time. Volatile species showed a distinct transition point at which aerosol detection efficiency began decreasing with increasing particle size. This critical diameter indicated the largest particle size for which complete particle detection should be expected and agreed with theories published in other works. Aerosol detection efficiencies also displayed power law dependencies on particle size. Aerosol detection efficiencies ranged from 10- 5 to 10- 11. Free molecular heat and mass transfer theory was applied, but

  19. Modeling and simulation of ion-filtered inductively coupled plasma using argon plasma

    NASA Astrophysics Data System (ADS)

    Wu, Chao; Wang, Jian; Zhang, Weiwang; Luo, Yi

    2015-03-01

    An ion-filtered inductively coupled plasma (IF-ICP) is proposed to reduce ion bombardment and provide high metastable species density for chemical vapor deposition. Argon plasma, which has simple reaction mechanism, is simulated to show the effects of ion filter. Compared to typical ICP, the maximum density of ions of IF-ICP is lower while that of metastable species is higher. The filter can absorb ions effectively and relatively small amount of metastable species, with the absorption coefficient proportional to its surface area. A proper gap between filter and substrate can achieve more metastable species and less ions on the substrate. The pressure and RF power need to be optimized based on the tradeoff between deposition rate and ion damage. The density of ions on the substrate can be reduced by two orders of magnitude while that of metastable species are maintained in the order of 1017 m-3 under the optimized conditions.

  20. Molecular Frame Photoelectron Angular Distributions for Core Ionization of CF4 and C2H2F2

    NASA Astrophysics Data System (ADS)

    Trevisan, C. S.; Williams, J. B.; Menssen, A. J.; Rescigno, T. N.; Dorner, R.; McCurdy, C. W.

    2015-05-01

    We present experimental and theoretical results for the angular dependence of electrons ejected from the core orbitals of tetrafluoromethane (CF4) which display a tendency to avoid molecular bonds if averaged over directions of polarization of the incident X-ray beam, in contrast to earlier cases (CH4, H2O and NH3) studied by the same methods. To investigate whether the imaging effect can be used to detect the creation of core holes by photoionization from one of two atoms of the same type in a molecule, we computed and measured MFPADs of difluoroethylene (C2H2F2). Good agreement with the experimentally measured angular distributions show that the MFPADs contain the clear signature of the core-hole origin of the photoelectron, and validate the use of computed MFPADs as promising tools for the interpretation of such experiments. Our measurements employ the COLTRIMS method and the calculations were performed with the Complex Kohn Variational method. Work supported in part by the USDOE, Office of Science, Office of WDTS under the Visiting Faculty Program.

  1. Characterization of a GEM-based scintillation detector with He–CF4 gas mixture in clinical proton beams

    NASA Astrophysics Data System (ADS)

    Nichiporov, D.; Coutinho, L.; Klyachko, A. V.

    2016-04-01

    Accurate, high-spatial resolution dosimetry in proton therapy is a time consuming task, and may be challenging in the case of small fields, due to the lack of adequate instrumentation. The purpose of this work is to develop a novel dose imaging detector with high spatial resolution and tissue equivalent response to dose in the Bragg peak, suitable for beam commissioning and quality assurance measurements. A scintillation gas electron multiplier (GEM) detector based on a double GEM amplification structure with optical readout was filled with a He/CF4 gas mixture and evaluated in pristine and modulated proton beams of several penetration ranges. The detector’s performance was characterized in terms of linearity in dose rate, spatial resolution, short- and long-term stability and tissue-equivalence of response at different energies. Depth-dose profiles measured with the GEM detector in the 115–205 MeV energy range were compared with the profiles measured under similar conditions using the PinPoint 3D small-volume ion chamber. The GEM detector filled with a He-based mixture has a nearly tissue equivalent response in the proton beam and may become an attractive and efficient tool for high-resolution 2D and 3D dose imaging in proton dosimetry, and especially in small-field applications.

  2. Characterization of a GEM-based scintillation detector with He-CF4 gas mixture in clinical proton beams.

    PubMed

    Nichiporov, D; Coutinho, L; Klyachko, A V

    2016-04-21

    Accurate, high-spatial resolution dosimetry in proton therapy is a time consuming task, and may be challenging in the case of small fields, due to the lack of adequate instrumentation. The purpose of this work is to develop a novel dose imaging detector with high spatial resolution and tissue equivalent response to dose in the Bragg peak, suitable for beam commissioning and quality assurance measurements. A scintillation gas electron multiplier (GEM) detector based on a double GEM amplification structure with optical readout was filled with a He/CF4 gas mixture and evaluated in pristine and modulated proton beams of several penetration ranges. The detector's performance was characterized in terms of linearity in dose rate, spatial resolution, short- and long-term stability and tissue-equivalence of response at different energies. Depth-dose profiles measured with the GEM detector in the 115-205 MeV energy range were compared with the profiles measured under similar conditions using the PinPoint 3D small-volume ion chamber. The GEM detector filled with a He-based mixture has a nearly tissue equivalent response in the proton beam and may become an attractive and efficient tool for high-resolution 2D and 3D dose imaging in proton dosimetry, and especially in small-field applications. PMID:26992243

  3. Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas

    SciTech Connect

    Kim, Hyun Jun; Hwang, Hye Ju; Cho, Jeong Hee; Chae, Hee Sun; Kim, Dong Hwan; Chung, Chin-Wook

    2015-04-15

    The electrical characteristics and the spatial distribution of oxygen plasma according to the number of turns in ferrite inductively coupled plasmas (ferrite ICPs) are investigated. Through a new ICP model, which includes the capacitive coupling and the power loss of the ferrite material with the conventional ICP model, the variation of the oxygen discharge characteristics depending on the number of turns is simply understood by the electrical measurement, such as the antenna voltages and the currents. As the number of the turns increases, the capacitive coupling dominantly affects the spatial plasma distribution. This capacitive coupling results in a center focused density profile along the radial direction. In spite of the same discharge conditions (discharge chamber, neutral gas, and pressure), the spatial plasma distribution over 450 mm has drastic changes by increasing number of the turns. In addition, the effect of the negative species to the density profile is compared with the argon discharge characteristics at the same discharge configuration.

  4. The role of the relative voltage and phase for frequency coupling in a dual-frequency capacitively coupled plasma

    SciTech Connect

    O'Connell, D.; Gans, T.; Semmler, E.; Awakowicz, P.

    2008-08-25

    Frequency coupling in multifrequency discharges is a complex nonlinear interaction of the different frequency components. An alpha-mode low pressure rf capacitively coupled plasma operated simultaneously with two frequencies is investigated and the coupling of the two frequencies is observed to greatly influence the excitation and ionization within the discharge. Through this, plasma production and sustainment are dictated by the corresponding electron dynamics and can be manipulated through the dual-frequency sheath. These mechanisms are influenced by the relative voltage and also the relative phase of the two frequencies.

  5. Dispersion of Plasma Dust Acoustic Waves in the Strong-Coupling Regime

    SciTech Connect

    Pieper, J.B.; Goree, J.

    1996-10-01

    Low-frequency compressional waves were observed in a suspension of strongly coupled 9.4 {mu}m spheres in an rf Kr plasma. Both parts of the complex wave number were measured to determine the dispersion relation, which agreed with a theoretical model of damped dust acoustic waves, ignoring strong coupling, but not with a strongly coupled dust-lattice wave model. The results yield experimental values for the dust plasma frequency, charge, Debye length, and damping rate, and support the applicability of fluid-based dispersion relations to strongly coupled dusty plasmas, which has been a controversy. {copyright} {ital 1996 The American Physical Society.}

  6. Analysis of plasma coupling with the prototype DIII-D ICRF antenna

    SciTech Connect

    Ryan, P.M.; Hoffman, D.J.; Bigelow, T.S.; Baity, F.W.; Gardner, W.L.; Mayberry, M.J.; Rothe, K.E.

    1988-01-01

    Coupling to plasma in the H-mode is essential to the success of future ignited machines such as CIT. To ascertain voltage and current requirements for high-power second harmonic heating (2 MW in a 35- by 50-cm port), coupling to the DIII-D tokamak with a prototype compact loop antenna has been measured. The results show good loading for L-mode and limiter plasmas, but coupling 2 MW to an H-mode plasma demands voltages and currents near the limit of present technology. We report the technological analysis and progress that allow coupling of these power densities. 5 refs., 4 figs.

  7. Quantum bound of the shear viscosity of a strongly coupled plasma.

    PubMed

    Fortov, V E; Mintsev, V B

    2013-09-20

    String theory methods led to the hypothesis that the ratio of a shear viscosity coefficient to the volume density of entropy of any physical system has a lower bound. Systems with strong coupling have a small viscosity as compared to weakly coupled plasmas in which the viscosity is proportional to the mean free path. Here, we have estimated the fully ionized strongly coupled plasma viscosity based on the dynamic experimental data on electrical conductivity and have shown that the ratio of viscosity to entropy of the strongly coupled plasma is very close to that of the lower bound predicted by the string theory. PMID:24093269

  8. Temporal Analysis of Electrostatic Chuck Characteristics in Inductively Coupled Plasma

    NASA Astrophysics Data System (ADS)

    Shim, Gyu Il; Sugai, Hideo

    Johnsen-Rahbek electrostatic chuck (ESC) for holding a silicon wafer in semiconductor processing is investigated in inductively coupled plasma (ICP). Bi-layer model of the ESC consisting of a thick bulk layer and a thin interface layer is proposed. The resistance of each layer is obtained by measuring the ESC voltage-current (V-I) characteristic with and without the wafer in ICP, along with the voltage effectively applied to the interface layer. Surface charges stored in the interface layer capacitance are found by the time-integration of current in a turn-on phase of a ramped voltage. On the other hand, the chuck holding force is in situ obtained in a turn-off phase of slowly ramped voltage, from the critical conditions of helium gas pressurization for wafer de-chuck. The electrostatic force predicted on a basis of equivalent circuit in the bi-layer model coincides with the mechanical force obtained in the wafer de-touch experiments.

  9. Effect of random charge fluctuation on strongly coupled dusty Plasma

    SciTech Connect

    Issaad, M.; Rouiguia, L.; Djebli, M.

    2008-09-07

    Modeling the interaction between particles is an open issue in dusty plasma. We dealt with strongly coupled dust particles in two dimensional confined system. For small number of clusters, we investigate the effect of random charge fluctuation on background configuration. The study is conducted for a short rang as well as a long rang potential interaction. Numerical simulation is performed using Monte-Carlo simulation in the presence of parabolic confinement and at low temperature. We have studied the background configurations for a dust particles with constant charge and in the presence of random charge fluctuation due to the discrete nature of charge carriers. The latter is studied for a positively charged dust when the dominant charging process is due to photo-emission from the dust surface. It is found, for small classical cluster consisting of small number of particles, short rang potential gives the same result as long rang one. It is also found that the random charge fluctuation affect the background configurations.

  10. Gold fingerprinting by laser ablation inductively coupled plasma mass spectrometry

    NASA Astrophysics Data System (ADS)

    Watling, R. John; Herbert, Hugh K.; Delev, Dianne; Abell, Ian D.

    1994-02-01

    Laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) has been applied to the characterization of the trace element composition "fingerprint" of selected gold samples from Western Australia and South Africa. By comparison of the elemental associations it is possible to relate gold to a specific mineralizing event, mine or bullion sample. This methodology facilitates identification of the provenance of stolen gold or gold used in salting activities. In this latter case, it is common for gold from a number of sources to be used in the salting process. Consequently, gold in the prospect being salted will not come from a single source and identification of multiple sources for this gold will establish that salting has occurred. Preliminary results also indicate that specific elemental associations could be used to identify the country of origin of gold. The technique has already been applied in 17 cases involving gold theft in Western Australia, where it is estimated that up to 2% of gold production is "relocated" each year as a result of criminal activities.

  11. Uranium quantification in semen by inductively coupled plasma mass spectrometry.

    PubMed

    Todorov, Todor I; Ejnik, John W; Guandalini, Gustavo; Xu, Hanna; Hoover, Dennis; Anderson, Larry; Squibb, Katherine; McDiarmid, Melissa A; Centeno, Jose A

    2013-01-01

    In this study we report uranium analysis for human semen samples. Uranium quantification was performed by inductively coupled plasma mass spectrometry. No additives, such as chymotrypsin or bovine serum albumin, were used for semen liquefaction, as they showed significant uranium content. For method validation we spiked 2g aliquots of pooled control semen at three different levels of uranium: low at 5 pg/g, medium at 50 pg/g, and high at 1000 pg/g. The detection limit was determined to be 0.8 pg/g uranium in human semen. The data reproduced within 1.4-7% RSD and spike recoveries were 97-100%. The uranium level of the unspiked, pooled control semen was 2.9 pg/g of semen (n=10). In addition six semen samples from a cohort of Veterans exposed to depleted uranium (DU) in the 1991 Gulf War were analyzed with no knowledge of their exposure history. Uranium levels in the Veterans' semen samples ranged from undetectable (<0.8 pg/g) to 3350 pg/g. This wide concentration range for uranium in semen is consistent with known differences in current DU body burdens in these individuals, some of whom have retained embedded DU fragments. PMID:22944582

  12. Kolmogorov flow in two dimensional strongly coupled dusty plasma

    SciTech Connect

    Gupta, Akanksha; Ganesh, R. Joy, Ashwin

    2014-07-15

    Undriven, incompressible Kolmogorov flow in two dimensional doubly periodic strongly coupled dusty plasma is modelled using generalised hydrodynamics, both in linear and nonlinear regime. A complete stability diagram is obtained for low Reynolds numbers R and for a range of viscoelastic relaxation time τ{sub m} [0 < τ{sub m} < 10]. For the system size considered, using a linear stability analysis, similar to Navier Stokes fluid (τ{sub m} = 0), it is found that for Reynolds number beyond a critical R, say R{sub c}, the Kolmogorov flow becomes unstable. Importantly, it is found that R{sub c} is strongly reduced for increasing values of τ{sub m}. A critical τ{sub m}{sup c} is found above which Kolmogorov flow is unconditionally unstable and becomes independent of Reynolds number. For R < R{sub c}, the neutral stability regime found in Navier Stokes fluid (τ{sub m} = 0) is now found to be a damped regime in viscoelastic fluids, thus changing the fundamental nature of transition of Kolmogorov flow as function of Reynolds number R. A new parallelized nonlinear pseudo spectral code has been developed and is benchmarked against eigen values for Kolmogorov flow obtained from linear analysis. Nonlinear states obtained from the pseudo spectral code exhibit cyclicity and pattern formation in vorticity and viscoelastic oscillations in energy.

  13. Effect of Antenna Diameter on the Characteristics of Internal-Type Linear Inductively Coupled Plasma

    NASA Astrophysics Data System (ADS)

    Hyeuk Lim, Jong; Kim, Kyong Nam; Gweon, Gwang Ho; Hong, Seung Pyo; Yeom, Geun Young

    2009-09-01

    In this study, the antenna characteristics of an internal-type, linear, inductively coupled plasma (ICP) source were varied by changing the inner conductor diameter of the ICP antenna composed of an inner conductor enclosed by outer dielectric tubing. The effect of the varied antenna characteristics on the plasma characteristics and the electrical characteristics of the large area plasma source with a substrate area of 2300×2000 mm2 were investigated. The decrease of the antenna conductor diameter from 25 to 10 mm decreased the capacitance of the antenna between the conductor and the dielectric tubing, increased the plasma density, decreased the plasma potential at the same rf power, and improved the plasma uniformity. The increased plasma density and the decreased plasma potential obtained with the smaller antenna conductor diameter were attributed to the increased power transfer efficiency caused by the increased inductive coupling at the same rf power.

  14. Effect of Antenna Diameter on the Characteristics of Internal-Type Linear Inductively Coupled Plasma

    NASA Astrophysics Data System (ADS)

    Lim, Jong Hyeuk; Kim, Kyong Nam; Gweon, Gwang Ho; Hong, Seung Pyo; Yeom, Geun Young

    2009-09-01

    In this study, the antenna characteristics of an internal-type, linear, inductively coupled plasma (ICP) source were varied by changing the inner conductor diameter of the ICP antenna composed of an inner conductor enclosed by outer dielectric tubing. The effect of the varied antenna characteristics on the plasma characteristics and the electrical characteristics of the large area plasma source with a substrate area of 2300× 2000 mm2 were investigated. The decrease of the antenna conductor diameter from 25 to 10 mm decreased the capacitance of the antenna between the conductor and the dielectric tubing, increased the plasma density, decreased the plasma potential at the same rf power, and improved the plasma uniformity. The increased plasma density and the decreased plasma potential obtained with the smaller antenna conductor diameter were attributed to the increased power transfer efficiency caused by the increased inductive coupling at the same rf power.

  15. Local cooling, plasma reheating and thermal pinching induced by single aerosol droplets injected into an inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Chan, George C.-Y.; Hieftje, Gary M.

    2016-07-01

    The injection of a single micrometer-sized droplet into an analytical inductively coupled plasma (ICP) perturbs the plasma and involves three sequential effects: local cooling, thermal pinching and plasma reheating. Time-resolved two-dimensional monochromatic imaging of the load-coil region of an ICP was used to monitor this sequence of plasma perturbations. When a microdroplet enters the plasma, it acts as a local heat sink and cools the nearby plasma region. The cooling effect is considered local, although the cooling volume can be large and extends 6 mm from the physical location of the vaporizing droplet. The liberated hydrogen, from decomposition of water, causes a thermal pinch effect by increasing the thermal conductivity of the bulk plasma and accelerating heat loss at the plasma periphery. As a response to the heat loss, the plasma shrinks in size, which increases its power density. Plasma shrinkage starts around the same time when the microdroplet enters the plasma and lasts at least 2 ms after the droplet leaves the load-coil region. Once the vaporizing droplet passes through a particular plasma volume, that volume is reheated to an even higher temperature than under steady-state conditions. Because of the opposing effects of plasma cooling and reheating, the plasma conditions are different upstream (downward) and downstream (upward) from a vaporizing droplet - cooling dominates the downstream region whereas reheating controls in the upstream domain. The boundary between the local cooling and reheating zones is sharp and is only ~ 1 mm thick. The reheating effect persists a relatively long time in the plasma, at least up to 4 ms after the droplet moves out of the load-coil region. The restoration of plasma equilibrium after the perturbation induced by microdroplet injection is slow. Microdroplet injection also induces a momentary change in plasma impedance, and the impedance change was found to correlate qualitatively with the different stages of plasma

  16. 3-Dimensional Modeling of Capacitively and Inductively Coupled Plasma Etching Systems

    NASA Astrophysics Data System (ADS)

    Rauf, Shahid

    2008-10-01

    Low temperature plasmas are widely used for thin film etching during micro and nano-electronic device fabrication. Fluid and hybrid plasma models were developed 15-20 years ago to understand the fundamentals of these plasmas and plasma etching. These models have significantly evolved since then, and are now a major tool used for new plasma hardware design and problem resolution. Plasma etching is a complex physical phenomenon, where inter-coupled plasma, electromagnetic, fluid dynamics, and thermal effects all have a major influence. The next frontier in the evolution of fluid-based plasma models is where these models are able to self-consistently treat the inter-coupling of plasma physics with fluid dynamics, electromagnetics, heat transfer and magnetostatics. We describe one such model in this paper and illustrate its use in solving engineering problems of interest for next generation plasma etcher design. Our 3-dimensional plasma model includes the full set of Maxwell equations, transport equations for all charged and neutral species in the plasma, the Navier-Stokes equation for fluid flow, and Kirchhoff's equations for the lumped external circuit. This model also includes Monte Carlo based kinetic models for secondary electrons and stochastic heating, and can take account of plasma chemistry. This modeling formalism allows us to self-consistently treat the dynamics in commercial inductively and capacitively coupled plasma etching reactors with realistic plasma chemistries, magnetic fields, and reactor geometries. We are also able to investigate the influence of the distributed electromagnetic circuit at very high frequencies (VHF) on the plasma dynamics. The model is used to assess the impact of azimuthal asymmetries in plasma reactor design (e.g., off-center pump, 3D magnetic field, slit valve, flow restrictor) on plasma characteristics at frequencies from 2 -- 180 MHz. With Jason Kenney, Ankur Agarwal, Ajit Balakrishna, Kallol Bera, and Ken Collins.

  17. A new continuous calibration method for inductively coupled plasma spectrometry.

    PubMed

    Paredes, E; Maestre, S E; Todolí, J L

    2006-01-01

    A new calibration method was developed and applied to inductively coupled plasma atomic emission spectrometry. External calibration was performed as follows. A container was filled with a given volume of deionized (V(p)) water. Then a concentrated standard was introduced at a controlled rate (Q(e)) into the tank by means of a peristaltic pump. The resulting solution was stirred throughout the experiment. Simultaneously, the solution inside the tank was pumped from the vessel to the plasma at a given rate (Q(s)). The signal was continuously recorded. The variation of the concentration of the solution leaving the tank with time was determined by applying a basic equation of stirred tanks. The representation of the emission intensity versus the time and the further conversion of the time scale into a concentration scale gave rise to the calibration line. The best results in terms of linearity were achieved for V(p)=15 cm3, Q(e)=0.6-0.75 ml min(-1) and Q(s)=1-1.2 ml min(-1). Graphs with more than 40 standards were obtained within about 10 min. The results found were not statistically different from those afforded by the conventional calibration method. In addition, the new method was faster and supplied better linearity and precision than the conventional one. Another advantage of the stirred tank was that procedures such as dynamic calibration and standard additions could be easily and quickly applied, thus shortening the analysis time. A complete analysis following these procedures based on the measurement of 30 standards took about 5 min. Several synthetic as well as certified samples (i.e., bovine liver, mussel tissue and powdered milk) were analyzed with the stirred tank by applying four different calibration methodologies (i.e., external calibration, internal calibration, standard additions and a combination of internal standardization and standard additions), with the combination of internal standardization and standard additions being the method that provided

  18. FY05 LDRD Final Report Coupled Turbulenc/Transport Model for Edge-Plasmas

    SciTech Connect

    Rognlien, T; Cohen, R; LoDestro, L; Palasek, R; Umansky, M; Xu, X

    2006-02-09

    An edge-plasma simulation for tokamak fusion devices is developed that couples 3D turbulence and 2D transport, including detailed sources and sinks, to determine self-consistent steady-state plasma profiles. Relaxed iterative coupling is shown to be effective when edge turbulence is partially suppressed, for example, by shear E x B shear flow as occurs during the favorable H-mode region. Unsuppressed turbulence is found to lead to large, intermittent edge transport events where the coupling procedure can lead to substantial inaccuracies in describing the true time-averaged plasma behavior.

  19. Nonlinear frequency coupling in dual radio-frequency driven atmospheric pressure plasmas

    SciTech Connect

    Waskoenig, J.; Gans, T.

    2010-05-03

    Plasma ionization, and associated mode transitions, in dual radio-frequency driven atmospheric pressure plasmas are governed through nonlinear frequency coupling in the dynamics of the plasma boundary sheath. Ionization in low-power mode is determined by the nonlinear coupling of electron heating and the momentary local plasma density. Ionization in high-power mode is driven by electron avalanches during phases of transient high electric fields within the boundary sheath. The transition between these distinctly different modes is controlled by the total voltage of both frequency components.

  20. Measurement of the ion drag force in a collisionless plasma with strong ion-grain coupling

    SciTech Connect

    Nosenko, V.; Fisher, R.; Merlino, R.; Khrapak, S.; Morfill, G.; Avinash, K.

    2007-10-15

    The ion drag force acting on dust grains was measured experimentally in a low-pressure Ar plasma in the regime of strong ion-grain coupling. Argon ions were drifting in the axial ambipolar electric field naturally present in a hot-filament dc discharge plasma. Following the method of Hirt et al. [Phys. Plasmas 11, 5690 (2004)], hollow glass microspheres were dropped into the plasma and allowed to fall due to gravity. The ion drag force was derived from the particle trajectory deflection from the vertical direction. The result is in reasonable agreement with a theoretical model that takes strong ion-grain coupling into account.

  1. Comparative Study of Plasma Parameters in Magnetic Pole Enhanced Inductively Coupled Argon Plasmas

    NASA Astrophysics Data System (ADS)

    F., Jan; W. Khan, A.; Saeed, A.; Zakaullah, M.

    2013-04-01

    Langmuir probe measurements of radio frequency (RF) magnetic pole enhanced inductively coupled (MaPE-ICP) argon plasma were accomplished to obtain the electron number densities and electron temperatures. The measurements were carried out with a fixed RF frequency of 13.56 MHz in a pressure range of 7.5 mTorr to 75 mTorr at an applied RF power of 10 W and 100 W. These results are compared with a global (volume average) model. The results show good agreement between theoretical and experimental measurements. The electron number density shows an increasing trend with both RF power and pressure while the electron temperature shows decreasing trend as the pressure increases. The difference in the plasma potential and floating potential as a function of electron temperature measured from the electrical probe and that obtained theoretically shows a linear relation with a small difference in the coefficient of proportionality. The intensity of the emission line at 750.4 nm due to 2p1 → 1s2 (Paschen's notation) transition closely follows the variation of ne with RF power and filling gas pressure. Measured electron energy probability function (EEPF) shows that electron occupation changes mostly in the high-energy tail, which highlights close similarity of 750.4 nm argon line to ne.

  2. Effects of capacitor termination to an antenna coil on the plasma parameters in a radio frequency inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Han, Duksun; Lee, Hyo-Chang; Kim, H. J.; Sin Kim, Yu; Chung, Chin-Wook; Chae, Heesun

    2013-10-01

    The effects of capacitor termination to a solenoidal antenna coil on the plasma parameters, such as the plasma density, the electron temperature, the electron energy distribution function and the plasma potential, are studied in an Ar or O2/N2 gas mixture inductively coupled plasma (ICP). As the capacitance is varied from tens to hundreds of pF, the plasma parameters change significantly. When the reactance of the capacitor is half that of the antenna, there is a resonance condition where the electrostatic coupling between the antenna coil and the chamber wall is effectively suppressed. The plasma density is maximal, while the electron temperature and the plasma potential are minimal under this resonance condition. This result shows that the ICP generated by the antenna coil with capacitor termination can be applied to a plasma process that requires high plasma density and low ion damage. The ashing process of a photoresistor by the ICP source with capacitor termination is also performed in this study and it is found that the ashing rate is enhanced under the resonance condition compared with the non-resonance condition.

  3. Dilute plasma coupling currents to a high voltage solar array in weak magnetic fields

    NASA Technical Reports Server (NTRS)

    Grier, N. T.

    1984-01-01

    The plasma coupling current to an approximately 2000 sq cm array was measured for externally biased positive and negative voltages on the array to 1000 V in applied magnetic field strengths from 0 to 0.93 G. The plasma density varied from 2,000 to 1.3 million electrons/cu cm. It was found that the magnetic field primarily increased the plasma coupling current for negative biases. For positive bias, the current could increase or decrease depending on the voltage, field strength, and plasma density. It was also found that the plasma coupling current was not very sensitive to how the plane of the array was oriented relative to the magnetic field.

  4. RELIABLE ANALYSES OF WATER BY INDUCTIVELY COUPLED PLASMA EMISSION SPECTROSCOPY. ANALYTICAL CHEMISTRY BRANCH

    EPA Science Inventory

    Reduction of stray light in the inductively coupled plasma emission spectrometer (ICPES) has greatly increased its reliability as a technique for the multielemental analysis of water. Because of interferences introduced by matrix elements, reliable analysis of some less-sensitive...

  5. Hyperpolarizabilities of one and two electron ions under strongly coupled plasma

    SciTech Connect

    Sen, Subhrangsu; Mandal, Puspajit; Kumar Mukherjee, Prasanta; Fricke, Burkhard

    2013-01-15

    Systematic investigations on the hyperpolarizabilities of hydrogen and helium like ions up to nuclear charge Z = 7 under strongly coupled plasma environment have been performed. Variation perturbation theory has been adopted to evaluate such properties for the one and two electron systems. For the two electron systems coupled Hartree-Fock theory, which takes care of partial electron correlation effects, has been utilised. Ion sphere model of the strongly coupled plasma, valid for ionic systems only, has been adopted for estimating the effect of plasma environment on the hyperpolarizability. The calculated free ion hyperpolarizability for all the systems is in good agreement with the existing data. Under confinement hyperpolarizabilities of one and two electron ions show interesting trend with respect to plasma coupling strength.

  6. Characterization of an inductively coupled plasma source with convergent nozzle

    NASA Astrophysics Data System (ADS)

    Dropmann, Michael; Clements, Kathryn; Edgren, Josh; Laufer, Rene; Herdrich, Georg; Matthews, Lorin; Hyde, Truell

    2015-11-01

    The inductively heated plasma generator (IPG6-B) located in the CASPER labs at Baylor University has recently been characterized for both air, nitrogen and helium. A primary area of research within the intended scope of the instrument is the analysis of material degradation under high heat fluxes such as those imposed by a plasma during atmospheric entry of a spacecraft and at the divertor within various fusion experiment. In order to achieve higher flow velocities and respectively higher heat fluxes, a new exit flange has been designed to allow the installation of nozzles with varying geometries at the exit of the plasma generator. This paper will discuss characterization of the plasma generator for a convergent nozzle accelerating the plasma jet to supersonic velocity. The diagnostics employed include a cavity calorimeter to measure the total plasma power, a Pitot probe to measure stagnation pressure and a heat flux probe to measure the local heat flux. Radial profiles of stagnation pressure and heat flux allowing the determination of the local plasma enthalpy in the plasma jet will be presented. Support from the NSF and the DOE (award numbers PHY-1262031 and PHY-1414523) is gratefully acknowledged.

  7. A Concept for Directly Coupled Pulsed Electromagnetic Acceleration of Plasmas

    NASA Technical Reports Server (NTRS)

    Thio, Y.C. Francis; Cassibry, Jason T.; Eskridge, Richard; Smith, James; Wu, S. T.; Rodgers, Stephen L. (Technical Monitor)

    2001-01-01

    Plasma jets with high momentum flux density are required for a variety of applications in propulsion research. Methods of producing these plasma jets are being investigated at NASA Marshall Space Flight Center. The experimental goal in the immediate future is to develop plasma accelerators which are capable of producing plasma jets with momentum flux density represented by velocities up to 200 km/s and ion density up to 10(exp 24) per cu m, with sufficient precision and reproducibility in their properties, and with sufficiently high efficiency. The jets must be sufficiently focused to allow them to be transported over several meters. A plasma accelerator concept is presented that might be able to meet these requirements. It is a self-switching, shaped coaxial pulsed plasma thruster, with focusing of the plasma flow by shaping muzzle current distribution as in plasma focus devices, and by mechanical tapering of the gun walls. Some 2-D MHD modeling in support of the conceptual design will be presented.

  8. Photoelectron extraction efficiency from a CsI photocathode and THGEM operation in He-CF4 and He-CH4 mixtures

    NASA Astrophysics Data System (ADS)

    Coimbra, A. E. C.; Israelashvili, I.; dos Santos, J. M. F.

    2016-03-01

    This work presents the experimental measurements obtained for UV-induced photo-electron extraction efficiency from a CsI photocathode into He with CF4 and CH4 gas mixtures. A 1000Å CsI photocathode was deposited on a gold plated THGEM for photo-electron conversion. Charge-gain measurements were obtained with a Single-THGEM detector operating in these gas mixtures using a continuous UV lamp for the extraction of photo-electrons. Charge-gains in excess of 105 were obtained for gas mixtures containing percentages of quencher higher than 20% while photo-electron extraction efficiency achieved ~ 50% for He/CF4 and ~ 30% for He/CH4. Single photon electron measurements were also performed to assess the maximal gains reached in this regime. A discussion for future GPM cryogenic applications is presented.

  9. Coupled microwave ECR and radio-frequency plasma source for plasma processing

    DOEpatents

    Tsai, Chin-Chi; Haselton, Halsey H.

    1994-01-01

    In a dual plasma device, the first plasma is a microwave discharge having its own means of plasma initiation and control. The microwave discharge operates at electron cyclotron resonance (ECR), and generates a uniform plasma over a large area of about 1000 cm.sup.2 at low pressures below 0.1 mtorr. The ECR microwave plasma initiates the second plasma, a radio frequency (RF) plasma maintained between parallel plates. The ECR microwave plasma acts as a source of charged particles, supplying copious amounts of a desired charged excited species in uniform manner to the RF plasma. The parallel plate portion of the apparatus includes a magnetic filter with static magnetic field structure that aids the formation of ECR zones in the two plasma regions, and also assists in the RF plasma also operating at electron cyclotron resonance.

  10. Coupled microwave ECR and radio-frequency plasma source for plasma processing

    DOEpatents

    Tsai, C.C.; Haselton, H.H.

    1994-03-08

    In a dual plasma device, the first plasma is a microwave discharge having its own means of plasma initiation and control. The microwave discharge operates at electron cyclotron resonance (ECR), and generates a uniform plasma over a large area of about 1000 cm[sup 2] at low pressures below 0.1 mtorr. The ECR microwave plasma initiates the second plasma, a radio frequency (RF) plasma maintained between parallel plates. The ECR microwave plasma acts as a source of charged particles, supplying copious amounts of a desired charged excited species in uniform manner to the RF plasma. The parallel plate portion of the apparatus includes a magnetic filter with static magnetic field structure that aids the formation of ECR zones in the two plasma regions, and also assists in the RF plasma also operating at electron cyclotron resonance. 4 figures.

  11. Investigations of lower hybrid wave-plasma coupling by gas puffing in HT-7

    SciTech Connect

    Ding, B. J.; Li, M. H.; Qin, Y. L.; Li, W. K.; Zhang, L. Z.; Shan, J. F.; Liu, F. K.; Wang, M.; Meng, L. G.; Xu, H. D.; Wang, D. X.; Jie, Y. X.; Sun, Y. W.; Shen, B.; Zhang, W.; Wang, X. M.; Wu, J. H.; Gao, X.; Zhang, X. D.; Zhao, Y. P.

    2010-02-15

    Lower hybrid wave (LHW)-plasma coupling experiments in HT-7 [J. K. Xie and HT-7 Group, Proceedings of the 16th International Conference on Fusion Energy, Montreal, 1996 (IAEA, Trieste, 1997), Vol. 1, p. 685] were carried out by means of puffing gas (CD{sub 4} and D{sub 2}) just around the antenna. Both experiments show that wave-plasma coupling is improved by the gas puffing. The maximum distance between the plasma and the antenna is limited to about 8 cm due to the plasma disruption. The variation in the lined averaged density in the different channels gives a possible evidence of the mechanism of the ionization of neutral gas. The effect of the gas flow rate on the wave-plasma coupling shows that an optimized gas flow rate is necessary for good coupling, being consistent with simulation through Brambilla theory qualitatively. Experiments with puffing D{sub 2} show that the improved coupling results from the global density increase and the local gas puffing. Langmuir probe measurements indicate that the gas puffing effectively increases the density and decreases the temperature in scrape of layer. Studies show that the ionization of the puffed gas is affected by both LHW electric field and plasma temperature. Comparison of D{sub 2} and CD{sub 4} puffing shows that D{sub 2} improves coupling better with less effect on core density.

  12. Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry. Part I: basic concepts

    NASA Astrophysics Data System (ADS)

    Howling, A. A.; Guittienne, Ph; Jacquier, R.; Furno, I.

    2015-12-01

    The coupling between an inductive source and the plasma determines the power transfer efficiency and the reflected impedance in the primary circuit. Usually, the plasma coupling is analysed by means of a transformer equivalent circuit, where the plasma inductance and resistance are estimated using a global plasma model. This paper shows that, for planar RF antennas, the mutual inductance between the plasma and the primary circuit can be calculated using partial inductances and the complex image method, where the plasma coupling is determined in terms of the plasma skin depth and the distance to the plasma. To introduce the basic concepts, the mutual inductance is calculated here for a linear conductor parallel to the plasma surface. In the accompanying paper part II Guittienne et al (2015 Plasma Sources Sci. Technol. 24 065015), impedance measurements on a RF resonant planar plasma source are modeled using an impedance matrix where the plasma-antenna mutual impedances are calculated using the complex image method presented here.

  13. An unambiguous signature in molecular frame photoelectron angular distributions of core hole localization in fluorine K-edge photoionization of CF4

    NASA Astrophysics Data System (ADS)

    McCurdy, C. W.; Rescigno, T. N.; Trevisan, C. S.; Lucchese, R. R.

    2016-05-01

    Molecular Frame Photoelectron Angular Distributions (MFPADs) are calculated using the Complex Kohn variational method for core-hole ionization of the carbon and fluorines in CF4 at photoelectron energies below 15 eV. The angular distributions for localized versus delocalized core-hole creation on the four equivalent fluorines are radically different. A strong propensity for the dissociation to take place via the mechanism hν +CF4 -->CF 4 + +e- -->CF 3 + +F(1s-1) -->CF 3 + +F+ + 2e- in which a core excited neutral fluorine atom ionizes during or after dissociation creates the conditions for experimental observation of core hole localization. Comparison with recent unpublished experiments at the Advanced Light Source that measured the Recoil Frame Photoelectron Angular Distributions (averaged over CF3 rotations around the recoil axis) for fluorine K-edge ionization gives unambiguous evidence that these experiments directly observed the creation of an almost completely localized core hole on the dissociating fluorine atom when the molecule was initially photoionized. Work supported by USDOE, OBES Chemical Sciences, Geosciences, and Biosciences Division.

  14. Analytic formulation for the ac electrical conductivity in two- temperature, strongly coupled, overdense plasma: FORTRAN subroutine

    SciTech Connect

    Cauble, R.; Rozmus, W.

    1993-10-21

    A FORTRAN subroutine for the calculation of the ac electrical conductivity in two-temperature, strongly coupled, overdense plasma is presented. The routine is the result of a model calculation based on classical transport theory with application to plasmas created by the interaction of short pulse lasers and solids. The formulation is analytic and the routine is self-contained.

  15. Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

    SciTech Connect

    Brihoum, Melisa; Cunge, Gilles; Darnon, Maxime; Joubert, Olivier; Gahan, David; Braithwaite, Nicholas St. J.

    2013-03-15

    Changes in the ion flux and the time-averaged ion distribution functions are reported for pulsed, inductively coupled RF plasmas (ICPs) operated over a range of duty cycles. For helium and argon plasmas, the ion flux increases rapidly after the start of the RF pulse and after about 50 {mu}s reaches the same steady state value as that in continuous ICPs. Therefore, when the plasma is pulsed at 1 kHz, the ion flux during the pulse has a value that is almost independent of the duty cycle. By contrast, in molecular electronegative chlorine/chlorosilane plasmas, the ion flux during the pulse reaches a steady state value that depends strongly on the duty cycle. This is because both the plasma chemistry and the electronegativity depend on the duty cycle. As a result, the ion flux is 15 times smaller in a pulsed 10% duty cycle plasma than in the continuous wave (CW) plasma. The consequence is that for a given synchronous RF biasing of a wafer-chuck, the ion energy is much higher in the pulsed plasma than it is in the CW plasma of chlorine/chlorosilane. Under these conditions, the wafer is bombarded by a low flux of very energetic ions, very much as it would in a low density, capacitively coupled plasma. Therefore, one can extend the operating range of ICPs through synchronous pulsing of the inductive excitation and capacitive chuck-bias, offering new means by which to control plasma etching.

  16. MICROSCALE FLOW INJECTION AND MICROBORE HIGH-PERFORMANCE LIQUID CHROMATORGRAPHY COUPLED WITH INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRY VIA A HIGH-EFFICIENCY NEBULIZER

    EPA Science Inventory

    A high-effeciency nebulizer has been used for coupling microscale flow injection and microbore high-performance liquid chromatography with inductively coupled plasma mass spectrometry (ICPMS). The microscale flow injection system was configured to minimize band broadening between...

  17. Coupled beam hose and self-modulation instabilities in overdense plasma.

    PubMed

    Schroeder, C B; Benedetti, C; Esarey, E; Grüner, F J; Leemans, W P

    2012-08-01

    Transverse stability of the drive beam is critical to plasma wakefield accelerators. A long, relativistic particle beam propagating in an overdense plasma is subject to beam envelope modulation and centroid displacement (hosing) instabilities. Coupled equations for the beam centroid and envelope are derived and solved. It is shown that the hosing growth rate is comparable to self-modulation, and coupling of the self-modulation enhances beam hosing and induces harmonic content. Large amounts of hosing significantly alters the structure of the plasma wakefields. PMID:23005864

  18. A comprehensive study of different gases in inductively coupled plasma torch operating at one atmosphere

    SciTech Connect

    Punjabi, Sangeeta B.; Joshi, N. K.; Mangalvedekar, H. A.; Lande, B. K.; Das, A. K.; Kothari, D. C.

    2012-01-15

    A numerical study is done to understand the possible operating regimes of RF-ICP torch (3 MHz, 50 kW) using different gases for plasma formation at atmospheric pressure. A two dimensional numerical simulation of RF-ICP torch using argon, nitrogen, oxygen, and air as plasma gas has been investigated using computational fluid dynamic (CFD) software fluent{sup (c)}. The operating parameters varied here are central gas flow, sheath gas flow, RF-power dissipated in plasma, and plasma gas. The temperature contours, flow field, axial, and radial velocity profiles were investigated under different operating conditions. The plasma resistance, inductance of the torch, and the heat distribution for various plasma gases have also been investigated. The plasma impedance of ICP torch varies with different operating parameters and plays an important role for RF oscillator design and power coupling. These studies will be useful to decide the design criteria for ICP torches required for different material processing applications.

  19. Surface modification of polypropylene separators in lithium-ion batteries using inductively coupled plasma treatment.

    PubMed

    Son, Jinyoung; Kim, Min-Sik; Lee, Hyun Woo; Yu, Jong-Sung; Kwon, Kwang-Ho

    2014-12-01

    We describe herein an improvement in the surface wettability of plasma-treated separators for use in lithium-ion batteries. We treated the separators with an O2/Ar inductively coupled plasma to increase their surface energy. The plasma treatment on the separator and plasma diagnostic experiments were performed in an inductively coupled plasma (ICP) reactor. The fraction of Ar in the O2/Ar plasma was changed from 0% to 100%. The plasma diagnostics were performed using optical emission spectroscopy and a double Langmuir probe. To confirm the morphological change of the separator membrane by the plasma treatment, we used the scanning electron microscopy. The surface energy measurements were performed using the drop method. We found that the plasma treatment transformed the separator from a hydrophobic membrane to a hydrophilic one, thereby achieving high separator wettability. After the treatment of the separators with O2/Ar plasma, the batteries exhibited better cycle performance and rate capacity than those employing the untreated ones. PMID:25971067

  20. Simulations of the formation of strongly coupled plasmas using pulsed power

    SciTech Connect

    Keinigs, R.K.; Wood, B.; Munson, C.; Trainor, R.J.

    1999-07-01

    One experimental campaign planned for the pulse power facility, atlas, will be devoted to the investigation of strongly-coupled plasma (SCP) effects transport phenomena and equations-of-state in high-Z materials. Methods for forming strongly coupled plasmas using the pulsed-power facility, Atlas, are currently under investigation. For SCP experiments being planned, a metal plasma (p/p{sub a} {approximately}0.1, and T {approximately}1--2 eV) imbedded in gas or foam (p {approximately}.05 p{sub metals}, T {approximately} 0.5eV) can produce initial values of {Gamma} (coupling parameter) between 2--20. One approach to forming a plasma with the desired properties involves using an auxiliary capacitor bank to ohmically heat a thin metal shell to vaporization. The expansion of the plasma is impeded by the imbedding gas. Both one and two-dimensional magneto-hydrodynamic models are being employed to characterize the plasma and determine the tamping conditions required for its confinement. Results for a titanium plasma, the confinement dynamics for this system, and values obtained for {Gamma} will be presented. Means for experimentally diagnosing such plasmas will also be discussed.

  1. Simulations of ponderomotive effects in inductively coupled plasmas

    SciTech Connect

    Sydorenko, D.Y.; Smolyakov, A.I.; Tyshetskiy, Y.O.; Godyak, V.A.

    2005-03-01

    The electromagnetic quasineutral particle-in-cell code, simulating interaction of a plane electromagnetic wave with a plasma slab, is developed. The code is used to study the ponderomotive effects in a plasma with a finite temperature. Simulations in linear regime show the strong thermal reduction of the ponderomotive force, which is in a good agreement with the linear analytical theory. It is found that in the essentially nonlinear regime, when the electron trajectories are strongly modified, the amplitude of the ponderomotive force increases compared to the linear case, but remains lower than the classical cold plasma value. The transition from nonlinear to linear regime as a function of the amplitude of the driving electromagnetic field is investigated.

  2. A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma

    SciTech Connect

    Kim, Young-Cheol; Kim, Hyun-Jun; Lee, Hyo-Chang; Chung, Chin-Wook

    2015-12-15

    In a plasma discharge system, the power loss at powered line, matching network, and other transmission line can affect the discharge characteristics such as the power transfer efficiency, voltage and current at powered electrode, and plasma density. In this paper, we propose a method to reduce power loss by using a step down transformer mounted between the matching network and the powered electrode in a capacitively coupled argon plasma. This step down transformer decreases the power loss by reducing the current flowing through the matching network and transmission line. As a result, the power transfer efficiency was increased about 5%–10% by using a step down transformer. However, the plasma density was dramatically increased compared to no transformer. This can be understood by the increase in ohmic heating and the decrease in dc-self bias. By simply mounting a transformer, improvement of discharge efficiency can be achieved in capacitively coupled plasmas.

  3. Quarkonium in a weakly-coupled quark-gluon plasma

    SciTech Connect

    Vairo, Antonio

    2010-12-22

    We report about a recent calculation of the heavy quarkonium mass and decay width in a quark-gluon plasma, whose temperature T and screening mass m{sub D} satisfy the hierarchy m{alpha}{sub s}>>T>>m{alpha}{sub s}{sup 2}>>m{sub D}, m being the heavy-quark mass, up to order m{alpha}{sub s}{sup 5}. The calculation may be relevant to understand the behavior of the {Upsilon}(1S) in a quark-gluon plasma at present-day colliders.

  4. Wave mode coupling due to plasma wakes in two-dimensional plasma crystals: In-depth view

    SciTech Connect

    Coueedel, L.

    2011-08-15

    Experiments with two-dimensional (2D) plasma crystals are usually carried out in rf plasma sheaths, where the interparticle interactions are modified due to the presence of plasma wakes. The wake-mediated interactions result in the coupling between wave modes in 2D crystals, which can trigger the mode-coupling instability and cause melting. The theory predicts a number of distinct fingerprints to be observed upon the instability onset, such as the emergence of a new hybrid mode, a critical angular dependence, a mixed polarization, and distinct thresholds. In this paper we summarize these key features and provide their detailed discussion, analyze the critical dependence on experimental parameters, and highlight the outstanding issues.

  5. Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma

    SciTech Connect

    Bora, B.; Bhuyan, H.; Favre, M.; Wyndham, E.; Chuaqui, H.; Kakati, M.

    2011-10-15

    Self-excited plasma series resonance is observed in low pressure capacitvely coupled radio frequency discharges as high-frequency oscillations superimposed on the normal radio frequency current. This high-frequency contribution to the radio frequency current is generated by a series resonance between the capacitive sheath and the inductive and resistive bulk plasma. In this report, we present an experimental method to measure the plasma series resonance in a capacitively coupled radio frequency argon plasma by modifying the homogeneous discharge model. The homogeneous discharge model is modified by introducing a correction factor to the plasma resistance. Plasma parameters are also calculated by considering the plasma series resonances effect. Experimental measurements show that the self-excitation of the plasma series resonance, which arises in capacitive discharge due to the nonlinear interaction of plasma bulk and sheath, significantly enhances both the Ohmic and stochastic heating. The experimentally measured total dissipation, which is the sum of the Ohmic and stochastic heating, is found to increase significantly with decreasing pressure.

  6. Neutral depletion in inductively coupled plasmas using hybrid-type direct simulation Monte Carlo

    SciTech Connect

    Shimada, Masashi; Tynan, George R.; Cattolica, Robert

    2008-02-01

    Neutral and ion transport phenomena were simulated by a hybrid-type direct simulation Monte Carlo (DSMC) method for a one-dimensional (1D) electrostatic plasma in Ar/N{sub 2} mixtures to identify the mechanism of neutral depletion. The results show that gas heating and pressure balance are the main mechanisms of neutral depletion in an inductively coupled plasma. When plasma pressure becomes comparable to neutral pressure in high density plasma sources (T{sub e}{approx}2-5 eV, n{sub e}{approx}10{sup 11}-10{sup 12} cm{sup -3}), the total pressure (neutral pressure and plasma pressure) is conserved. Therefore, the finite plasma pressure (mainly electron pressure) reduces the neutral pressure. Neutrals collide with ions that have been accelerated by the ambipolar electric field and with Franck-Condon dissociated atoms, resulting in gas heating. Significant neutral depletion (up to 90%) is found at the typical condition of inductively coupled plasma process reactors. The resulting neutral depletion enhances the plasma transport to the surrounding wall, increases the particle loss, and decreases the plasma density.

  7. Observation of helicon wave with m = 0 antenna in a weakly magnetized inductively coupled plasma source

    NASA Astrophysics Data System (ADS)

    Ellingboe, Bert; Sirse, Nishant; Moloney, Rachel; McCarthy, John

    2015-09-01

    Bounded whistler wave, called ``helicon wave,'' is known to produce high-density plasmas and has been exploited as a high density plasma source for many applications, including electric propulsion for spacecraft. In a helicon plasma source, an antenna wrapped around the magnetized plasma column launches a low frequency wave, ωce/2 >ωhelicon >ωce/100, in the plasma which is responsible for maintaining high density plasma. Several antenna designs have been proposed in order to match efficiently the wave modes. In our experiment, helicon wave mode is observed using an m = 0 antenna. A floating B dot probe, compensated to the capacitively coupled E field, is employed to measure axial-wave-field-profiles (z, r, and θ components) in the plasma at multiple radial positions as a function of rf power and pressure. The Bθ component of the rf-field is observed to be unaffected as the wave propagates in the axial direction. Power coupling between the antenna and the plasma column is identified and agrees with the E, H, and wave coupling regimes previously seen in M =1 antenna systems. That is, the Bz component of the rf-field is observed at low plasma density as the Bz component from the antenna penetrates the plasma. The Bz component becomes very small at medium density due to shielding at the centre of the plasma column; however, with increasing density, a sudden ``jump'' occurs in the Bz component above which a standing wave under the antenna with a propagating wave away from the antenna are observed.

  8. Wake potential in a strong coupling plasma from the AdS /CFT correspondence

    NASA Astrophysics Data System (ADS)

    Liu, Lian; Liu, Hui

    2016-04-01

    With the dielectric function computed from the AdS /CFT correspondence, we studied the wake potential induced by a fast moving charge in a strong-coupling plasma and compared it with the weak-coupling wake potential for different particle velocities as v =0.55 c and v =0.99 c . The most prominent difference between strong and weak wake potential is that, when v =0.99 c , the remarkable oscillation due to Cerenkov-like radiation and the Mach cone in weak coupling disappears in strong coupling, which implies that the plasmon mode with phase velocity lower than the speed of light dose not exist in the strong-coupling plasma.

  9. Coupled two-dimensional edge plasma and neutral gas modeling of tokamak scrape-off-layers

    SciTech Connect

    Maingi, R.

    1992-08-01

    The objective of this study is to devise a detailed description of the tokamak scrape-off-layer (SOL), which includes the best available models of both the plasma and neutral species and the strong coupling between the two in many SOL regimes. A good estimate of both particle flux and heat flux profiles at the limiter/divertor target plates is desired. Peak heat flux is one of the limiting factors in determining the survival probability of plasma-facing-components at high power levels. Plate particle flux affects the neutral flux to the pump, which determines the particle exhaust rate. A technique which couples a two-dimensional (2-D) plasma and a 2-D neutral transport code has been developed (coupled code technique), but this procedure requires large amounts of computer time. Relevant physics has been added to an existing two-neutral-species model which takes the SOL plasma/neutral coupling into account in a simple manner (molecular physics model), and this model is compared with the coupled code technique mentioned above. The molecular physics model is benchmarked against experimental data from a divertor tokamak (DIII-D), and a similar model (single-species model) is benchmarked against data from a pump-limiter tokamak (Tore Supra). The models are then used to examine two key issues: free-streaming-limits (ion energy conduction and momentum flux) and the effects of the non-orthogonal geometry of magnetic flux surfaces and target plates on edge plasma parameter profiles.

  10. On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes

    SciTech Connect

    Lee, Jin-Won; Lee, Yun-Seong Chang, Hong-Young; An, Sang-Hyuk

    2014-08-15

    In this study, we attempted to determine the possibility of multiple inductively coupled plasma (ICP) and helicon plasma sources for large-area processes. Experiments were performed with the one and two coils to measure plasma and electrical parameters, and a circuit simulation was performed to measure the current at each coil in the 2-coil experiment. Based on the result, we could determine the possibility of multiple ICP sources due to a direct change of impedance due to current and saturation of impedance due to the skin-depth effect. However, a helicon plasma source is difficult to adapt to the multiple sources due to the consistent change of real impedance due to mode transition and the low uniformity of the B-field confinement. As a result, it is expected that ICP can be adapted to multiple sources for large-area processes.

  11. Nonlinear coupling of acoustic and shear mode in a strongly coupled dusty plasma with a density dependent viscosity

    NASA Astrophysics Data System (ADS)

    Garai, S.; Janaki, M. S.; Chakrabarti, N.

    2016-09-01

    The nonlinear propagation of low frequency waves, in a collisionless, strongly coupled dusty plasma (SCDP) with a density dependent viscosity, has been studied with a proper Galilean invariant generalized hydrodynamic (GH) model. The well known reductive perturbation technique (RPT) has been employed in obtaining the solutions of the longitudinal and transverse perturbations. It has been found that the nonlinear propagation of the acoustic perturbations govern with the modified Korteweg-de Vries (KdV) equation and are decoupled from the sheared fluctuations. In the regions, where transversal gradients of the flow exists, coupling between the longitudinal and transverse perturbations occurs due to convective nonlinearity which is true for the homogeneous case also. The results, obtained here, can have relative significance to astrophysical context as well as in laboratory plasmas.

  12. Measurement of helicon wave coupling for current drive and anticipated role for high beta KSTAR plasmas

    NASA Astrophysics Data System (ADS)

    Wang, S. J.; Kim, H. J.; Joung, M.; Jeong, J. H.; Kim, J. H.; Bae, Y. S.; Kwak, J. G.; Wi, H. H.; Kim, H.-S.

    2015-11-01

    Helicon wave current drive has been suggested for efficient off-axis current drive in high electron beta tokamak plasmas. Fast wave drives centrally peaking current in the frequency range up to several ion cyclotron harmonics in the present tokamaks, such as KSTAR. Increasing fast wave frequency up to LH resonance frequency at the plasma edge, the spiral propagation of wave at the outer region of plasma lengthens the wave path to the plasma center. Also, optical thickness increases with frequency. It is expected that these effects produce efficient off-axis power deposition depending on the electron beta and magnetic field pitch. A low power TWA for helicon wave was installed and tested in KSTAR tokamak which is aiming for the steady-state high beta plasma requiring off-axis current drive. The power coupling properties of TWA at various plasma conditions will be presented. In addition to the coupling efficiency, issues such as load sensitivity and unwanted slow wave coupling will be addressed. Also, the simulation of plasma performance with the combination of helicon wave current drive and other conventional heating and current drive power in KSTAR will be discussed. This work was supported by the Korean Ministry of Science, ICT and Future Planning and by R&D Program through the National Fusion Research Institute of Korea (NFRI) funded by the Government funds.

  13. Accumulative coupling between magnetized tenuous plasma and gravitational waves

    NASA Astrophysics Data System (ADS)

    Zhang, Fan

    2016-07-01

    We explicitly compute the plasma wave (PW) induced by a plane gravitational wave (GW) traveling through a region of strongly magnetized plasma, governed by force-free electrodynamics. The PW comoves with the GW and absorbs its energy to grow over time, creating an essentially force-free counterpart to the inverse-Gertsenshtein effect. The time-averaged Poynting flux of the induced PW is comparable to the vacuum case, but the associated current may offer a more sensitive alternative to photodetection when designing experiments for detecting/constraining high-frequency gravitational waves. Aside from the exact solutions, we also offer an analysis of the general properties of the GW to PW conversion process, which should find use when evaluating electromagnetic counterparts to astrophysical gravitational waves that are generated directly by the latter as a second-order phenomenon.

  14. Cleaning of optical surfaces by capacitively coupled RF discharge plasma

    SciTech Connect

    Yadav, P. K. Rai, S. K.; Nayak, M.; Lodha, G. S.; Kumar, M.; Chakera, J. A.; Naik, P. A.; Mukherjee, C.

    2014-04-24

    In this paper, we report cleaning of carbon capped molybdenum (Mo) thin film by in-house developed radio frequency (RF) plasma reactor, at different powers and exposure time. Carbon capped Mo films were exposed to oxygen plasma for different durations at three different power settings, at a constant pressure. After each exposure, the thickness of the carbon layer and the roughness of the film were determined by hard x-ray reflectivity measurements. It was observed that most of the carbon film got removed in first 15 minutes exposure. A high density layer formed on top of the Mo film was also observed and it was noted that this layer cannot be removed by successive exposures at different powers. A significant improvement in interface roughness with a slight improvement in top film roughness was observed. The surface roughness of the exposed and unexposed samples was also confirmed by atomic force microscopy measurements.

  15. Characteristics of dual-frequency capacitively coupled SF6/O2 plasma and plasma texturing of multi-crystalline silicon

    NASA Astrophysics Data System (ADS)

    Xu, Dong-Sheng; Zou, Shuai; Xin, Yu; Su, Xiao-Dong; Wang, Xu-Sheng

    2014-06-01

    Due to it being environmentally friendly, much attention has been paid to the dry plasma texturing technique serving as an alternative candidate for multicrystalline silicon (mc-Si) surface texturing. In this paper, capacitively coupled plasma (CCP) driven by a dual frequency (DF) of 40.68 MHz and 13.56 MHz is first used for plasma texturing of mc-Si with SF6/O2 gas mixture. Using a hairpin resonant probe and optical emission techniques, DF-CCP characteristics and their influence on mc-silicon surface plasma texturing are investigated at different flow rate ratios, pressures, and radio-frequency (RF) input powers. Experimental results show that suitable plasma texturing of mc-silicon occurs only in a narrow range of plasma parameters, where electron density ne must be larger than 6.3 × 109 cm-3 and the spectral intensity ratio of the F atom to that of the O atom ([F]/[O]) in the plasma must be between 0.8 and 0.3. Out of this range, no cone-like structure is formed on the mc-silicon surface. In our experiments, the lowest reflectance of about 7.3% for mc-silicon surface texturing is obtained at an [F]/[O] of 0.5 and ne of 6.9 × 109 cm-3.

  16. Studies on the effect of finite geometrical asymmetry in dual capacitively coupled radio frequency plasma

    NASA Astrophysics Data System (ADS)

    Bora, B.

    2015-10-01

    In recent years, dual capacitively coupled radio frequency (CCRF) glow discharge plasma has been widely studied in the laboratory because of its simpler design and high efficiency for different material processing applications such as thin-film deposition, plasma etching, sputtering of insulating materials etc. The main objective of studies on dual frequency CCRF plasma has been the independent control of ion energy and ion flux using an electrical asymmetry effect (EAE). Most studies have been reported in electrode configurations that are either geometrically symmetric (both electrodes are equal) or completely asymmetric (one electrode is infinitely bigger than the other). However, it seems that most of the laboratory CCRF plasmas have finite electrode geometry. In addition, plasma series resonance (PSR) and electron bounce resonance (EBR) heating also come into play as a result of geometrical asymmetry as well as EAE. In this study, a dual frequency CCRF plasma has been studied in which the dual frequency CCRF has been coupled to the lumped circuit model of the plasma and the time-independent fluid model of the plasma sheath, in order to study the effect of finite geometrical asymmetry on the generation of dc-self bias and plasma heating. The dc self-bias is found to strongly depend on the ratio of the area between the electrodes. The dc self-bias is found to depend on the phase angle between the two applied voltage waveforms. The EAE and geometrical asymmetry are found to work differently in controlling the dc self-bias. It can be concluded that the phase angle between the two voltage waveforms in dual CCRF plasmas has an important role in determining the dc self-bias and may be used for controlling the plasma properties in the dual frequency CCRF plasma.

  17. Carbon 1s photoelectron spectroscopy of CF4 and CO: Search for chemical effects on the carbon 1s hole-state lifetime

    NASA Astrophysics Data System (ADS)

    Carroll, Thomas X.; Borve, Knut J.; Saethre, Leif J.; Bozek, John D.; Kukk, Edwin; Hahne, Jeffrey A.; Thomas, T. Darrah

    2002-06-01

    Carbon 1s photoelectron spectra for CF4 and CO have been measured at several photon energies near the carbon 1s threshold. The spectra have been analyzed in terms of the vibrational structure and the natural linewidth. For CO the vibrational structure shows evidence for anharmonicity in both the energy spacing and the intensity. Analysis of the results using an anharmonic model gives an equilibrium bond length for core-ionized CO that is 4.85 pm shorter than that of neutral CO. For CF4, the vibrational structure is very weak, and the analysis shows that the change in equilibrium CF bond length upon ionization is no more than 0.54 pm. Ab initio theoretical calculations give results in accord with these bond-length changes. The unusually small bond-length contraction in CF4 can be understood in terms of nonbonded fluorine-fluorine repulsion. The natural linewidth for core-ionized CO, 95plus-or-minus5 meV, is essentially the same as that of CH4. This result is in contrast with expectations based on the one-center model of Auger decay and earlier predictions based on semiempirical molecular orbital theory. More recent calculations indicate, however, that there is only a small difference between CO and CH4, in agreement with the observed result. For CF4, the natural linewidth is 77plus-or-minus6 meV. This value differs from that for CH4 in the direction expected from the electronegativities of hydrogen and fluorine, but is greater than the prediction based on semiempirical theory. The natural linewidth for CO with a carbon 1s electron excited to the 2pi resonance is 83 meV, which is significantly less than is found for core-ionized CO. Although this difference is supported by theoretical calculations, the direction of the difference is counterintuitive. An overview is presented of the current state of experimental and theoretical knowledge on carbon 1s linewidths.

  18. Extending plasma transport theory to strong coupling through the concept of an effective interaction potential

    SciTech Connect

    Baalrud, Scott D.; Daligault, Jérôme

    2014-05-15

    A method for extending traditional plasma transport theories into the strong coupling regime is presented. Like traditional theories, this is based on a binary scattering approximation, but where physics associated with many body correlations is included through the use of an effective interaction potential. The latter is simply related to the pair-distribution function. Modeling many body effects in this manner can extend traditional plasma theory to orders of magnitude stronger coupling. Theoretical predictions are tested against molecular dynamics simulations for electron-ion temperature relaxation as well as diffusion in one component systems. Emphasis is placed on the connection with traditional plasma theory, where it is stressed that the effective potential concept has precedence through the manner in which screening is imposed. The extension to strong coupling requires accounting for correlations in addition to screening. Limitations of this approach in the presence of strong caging are also discussed.

  19. Effect of axial finiteness on electron heating in low-frequency inductively coupled plasmas

    SciTech Connect

    Aman-ur-Rehman; Pu, Y.-K.

    2006-10-15

    Total power absorption inside the plasma (by taking the thermal motion of the electrons into account) has been calculated using different inductively coupled plasma models. The comparison shows that in the low-frequency region the results of the semi-infinite plasma models are different from those of the finite-length plasma models. The semi-infinite plasma models show net reduction of heating in the low-frequency region, due to thermal motion of the electrons from inside the skin region to outside the skin region. The finite-length plasma models on the other hand (due to change in the skin depth owing to the boundary condition of E=0 at z=L, and reflection of electrons from the plasma boundary) show that the decrease in heating due to the motion of the electrons from inside the skin depth to outside the skin depth is recovered by the reflection of the electrons from the plasma boundary. Hence, it is concluded that the results of the semi-infinite plasma models presented by Tyshetskiy et al. [Phys Rev. Lett. 90, 255002 (2003)] can be misleading (in the low-frequency region), since they overlooked the effect of axial finiteness of the plasma.

  20. Strong Helioseismic Constraints on Weakly-Coupled Plasmas

    NASA Astrophysics Data System (ADS)

    Nayfonov, Alan

    The extraordinary accuracy of helioseismic data allows detailed theoretical studies of solar plasmas. The necessity to produce solar models matching the experimental results in accuracy imposes strong constrains on the equations of state of solar plasmas. Several discrepancies between the experimental data and models have been successfully identified as the signatures of various non-ideal phenomena. Of a particular interest are questions of the position of the energy levels and the continuum edge and of the effect of the excited states in the solar plasma. Calculations of energy level and continuum shifts, based on the Green function formalism, appeared recently in the literature. These results have been used to examine effects of the shifts on the thermodynamic quantities. A comparison with helioseismic data has shown that the calculations based on lower-level approximations, such as the static screening in the effective two-particle wave equation, agree very well with the experimental data. However, the case of full dynamic screening produces thermodynamic quantities inconsistent with observations. The study of the effect of different internal partition functions on a complete set of thermodynamic quantities has revealed the signature of the excited states in the MHD (Mihalas, Hummer, Dappen) equation of state. The presence of exited states causes a characteristic 'wiggle' in the thermodynamic quantities due to the density-dependent occupation probabilities. This effect is absent if the ACTEX (ACTivity EXpansion) equation of state is used. The wiggle has been found to be most prominent in the quantities sensitive to density. The size of this excited states effect is well within the observational power of helioseismology, and very recent inversion analyses of helioseismic data seem to indicate the presence of the wiggle in the sun. This has a potential importance for the helioseismic determination of the helium abundance of the sun.

  1. Energetic electron avalanches and mode transitions in planar inductively coupled radio-frequency driven plasmas operated in oxygen

    SciTech Connect

    Zaka-ul-Islam, M.; Niemi, K.; Gans, T.; O'Connell, D.

    2011-07-25

    Space and phase resolved optical emission spectroscopic measurements reveal that in certain parameter regimes, inductively coupled radio-frequency driven plasmas exhibit three distinct operation modes. At low powers, the plasma operates as an alpha-mode capacitively coupled plasma driven through the dynamics of the plasma boundary sheath potential in front of the antenna. At high powers, the plasma operates in inductive mode sustained through induced electric fields due to the time varying currents and associated magnetic fields from the antenna. At intermediate powers, close to the often observed capacitive to inductive (E-H) transition regime, energetic electron avalanches are identified to play a significant role in plasma sustainment, similar to gamma-mode capacitively coupled plasmas. These energetic electrons traverse the whole plasma gap, potentially influencing plasma surface interactions as exploited in technological applications.

  2. Mode coupling and evolution in broken-symmetry plasmas

    SciTech Connect

    Sherman, E. Ya.; Abrarov, R. M.; Sipe, J. E.

    2009-10-15

    The control of nonlinear processes and possible transitions to chaos in systems of interacting particles is a fundamental physical problem. We propose a nonuniform solid-state plasma system, produced by the optical injection of current in two-dimensional semiconductor structures, where this control can be achieved. Due to an injected current, the system symmetry is initially broken. The subsequent nonequilibrium dynamics is governed by the spatially varying long-range Coulomb forces and electron-hole collisions. As a result, inhomogeneities in the charge and velocity distributions should develop rapidly and lead to previously unexpected experimental consequences. We suggest that the system eventually evolves into a behavior similar to chaos.

  3. Modelling of an inductively coupled plasma torch with argon at atmospheric pressure

    NASA Astrophysics Data System (ADS)

    Bahouh, Hanene; Rebiai, Saida; Rochette, David; Vacher, Damien; Dudeck, Michel

    2014-05-01

    A fluid dynamic model is used to simulate the electromagnetic field, fluid flow and heat transfer in an inductively coupled plasma torch working at atmospheric pressure for argon plasma. The numerical simulation is carried out by using the finite element method based on COMSOL software. The two-dimensional profiles of the electric field, temperature, velocity and charged particle densities are demonstrated inside the discharge region. These numerical results are obtained for a fixed flow rate, frequency and electric power.

  4. Dynamic properties of one-component strongly coupled plasmas: The sum-rule approach

    SciTech Connect

    Arkhipov, Yu. V.; Askaruly, A.; Davletov, A. E.; Ballester, D.; Tkachenko, I. M.

    2010-02-15

    The dynamic characteristics of strongly coupled one-component plasmas are studied within the moment approach. Our results on the dynamic structure factor and the dynamic local-field correction satisfy the sum rules and other exact relations automatically. A quantitative agreement is obtained with numerous simulation data on the plasma dynamic properties, including the dispersion and decay of collective modes. Our approach allows us to correct and complement the results previously found with other treatments.

  5. Alfvén wave coupled with flow-driven fluid instability in interpenetrating plasmas

    SciTech Connect

    Vranjes, J.

    2015-05-15

    The Alfvén wave is analyzed in case of one quasineutral plasma propagating with some constant speed v{sub 0} through another static quasineutral plasma. A dispersion equation is derived describing the Alfvén wave coupled with the flow driven mode ω=kv{sub 0} and solutions are discussed analytically and numerically. The usual solutions for two oppositely propagating Alfvén waves are substantially modified due to the flowing plasma. More profound is modification of the solution propagating in the negative direction with respect to the magnetic field and the plasma flow. For a large enough flow speed (exceeding the Alfvén speed in the static plasma), this negative solution may become non-propagating, with frequency equal to zero. In this case, it represents a spatial variation of the electromagnetic field. For greater flow speed it becomes a forward mode, and it may merge with the positive one. This merging of the two modes represents the starting point for a flow-driven instability, with two complex-conjugate solutions. The Alfvén wave in interpenetrating plasmas is thus modified and coupled with the flow-driven mode and this coupled mode is shown to be growing when the flow speed is large enough. The energy for the instability is macroscopic kinetic energy of the flowing plasma. The dynamics of plasma particles caused by such a coupled wave still remains similar to the ordinary Alfvén wave. This means that well-known stochastic heating by the Alfvén wave may work, and this should additionally support the potential role of the Alfvén wave in the coronal heating.

  6. Equivalent circuit effects on mode transitions in H{sub 2} inductively coupled plasmas

    SciTech Connect

    Xu, Hui-Jing; Zhao, Shu-Xia Zhang, Yu-Ru; Gao, Fei; Li, Xue-Chun; Wang, You-Nian

    2015-04-15

    It is well known experimentally that the circuit matching network plays an important role in the mode transition behavior of inductively coupled plasmas. To date, however, there have been no reports of numerical models being used to study the role of the matching circuit in the transition process. In this paper, a new two-dimensional self-consistent fluid model that couples the components of an equivalent circuit module is developed to investigate the effects of the equivalent circuit on the mode transition characteristics of an inductively coupled, hydrogen plasma. The equivalent circuit consists of a current source, impedance matching network, reactor impedance, and plasma transferred impedance. The nonlinear coupling of the external circuit with the internal plasma is investigated by adjusting the matching capacitance at a fixed input current. The electron density and temperature as well as the electromagnetic fields all change suddenly, and the E to H mode transition occurs abruptly at a certain matching capacitance as the impedance matching of the external circuit is varied. We also analyze the fields and the plasma characteristics during the transition process, especially for the case of the capacitive E mode.

  7. Interstellar turbulence model : A self-consistent coupling of plasma and neutral fluids

    SciTech Connect

    Shaikh, Dastgeer; Zank, Gary P.; Pogorelov, Nikolai

    2006-09-26

    We present results of a preliminary investigation of interstellar turbulence based on a self-consistent two-dimensional fluid simulation model. Our model describes a partially ionized magnetofluid interstellar medium (ISM) that couples a neutral hydrogen fluid to a plasma through charge exchange interactions and assumes that the ISM turbulent correlation scales are much bigger than the shock characteristic length-scales, but smaller than the charge exchange mean free path length-scales. The shocks have no influence on the ISM turbulent fluctuations. We find that nonlinear interactions in coupled plasma-neutral ISM turbulence are influenced substantially by charge exchange processes.

  8. Stable explicit coupling of the Yee scheme with a linear current model in fluctuating magnetized plasmas

    SciTech Connect

    Silva, Filipe da; Pinto, Martin Campos; Després, Bruno; Heuraux, Stéphane

    2015-08-15

    This work analyzes the stability of the Yee scheme for non-stationary Maxwell's equations coupled with a linear current model with density fluctuations. We show that the usual procedure may yield unstable scheme for physical situations that correspond to strongly magnetized plasmas in X-mode (TE) polarization. We propose to use first order clustered discretization of the vectorial product that gives back a stable coupling. We validate the schemes on some test cases representative of direct numerical simulations of X-mode in a magnetic fusion plasma including turbulence.

  9. Direct Observation of Mode-Coupling Instability in Two-Dimensional Plasma Crystals

    SciTech Connect

    Coueedel, L.; Nosenko, V.; Ivlev, A. V.; Zhdanov, S. K.; Thomas, H. M.; Morfill, G. E.

    2010-05-14

    Dedicated experiments on melting of two-dimensional plasma crystals were carried out. The melting was always accompanied by spontaneous growth of the particle kinetic energy, suggesting a universal plasma-driven mechanism underlying the process. By measuring three principal dust-lattice wave modes simultaneously, it is unambiguously demonstrated that the melting occurs due to the resonance coupling between two of the dust-lattice modes. The variation of the wave modes with the experimental conditions, including the emergence of the resonant (hybrid) branch, reveals exceptionally good agreement with the theory of mode-coupling instability.

  10. Mode-Coupling Instability in a Fluid Two-Dimensional Complex Plasma

    NASA Astrophysics Data System (ADS)

    Ivlev, A. V.; Zhdanov, S. K.; Lampe, M.; Morfill, G. E.

    2014-09-01

    A theory of the mode-coupling instability (MCI) in a fluid two-dimensional complex plasma is developed. In analogy to the point-wake model of the wake-mediated interactions commonly used to describe MCI in two-dimensional crystals, the layer-wake model is employed for fluids. It is demonstrated that the wake-induced coupling of wave modes occurs in both crystalline and fluid complex plasmas, but the confinement-density threshold, which determines the MCI onset in crystals, virtually disappears in fluids. The theory shows excellent qualitative agreement with available experiments and provides certain predictions to be verified.

  11. Characterization of Inductively Coupled Plasmas in High Power, High Pressure Regime

    NASA Astrophysics Data System (ADS)

    Wang, Jun-Chieh; Kenney, Jason; Agarwal, Ankur; Nichols, Michael; Rogers, James; Rauf, Shahid

    2015-09-01

    Inductively coupled plasmas (ICP) are widely used in the microelectronic industry for thin film etching. ICPs have typically been operated at low gas pressures (<50 mTorr) and they have been well-characterized in this regime. Several applications requiring high etch rates (e.g., vertical NAND etch) have recently extended the use of ICPs to the high power (>4000 W) and high pressure (>100 mTorr) regime. ICP operation in this high-power, high-pressure regime imposes a tremendous challenge of achieving good plasma uniformity over large substrates. This necessitates a good theoretical understanding of the underlying physics, thorough experimental characterization, and more accurate numerical models for hardware design guidance. In this study, we will focus on the characterization of ICP in the high-power, high-pressure regime. Computational modeling is done using CRTRS, our in-house 2D/3D plasma model. The fluid plasma model is coupled to a circuit model to self-consistently account for the capacitive coupling from the coils that is expected to dominate in this operating regime. Properties of Ar plasma will be discussed and compared with experiments. The impact of critical operating parameters such as ICP power, pressure, flow rate, and current ratio (in multi-coil antenna structures) on plasma characteristics will be examined. Results in relevant processing gases will also be discussed.

  12. A unified model of coupled arc plasma and weld pool for double electrodes TIG welding

    NASA Astrophysics Data System (ADS)

    Wang, Xinxin; Fan, Ding; Huang, Jiankang; Huang, Yong

    2014-07-01

    A three-dimensional model containing tungsten electrodes, arc plasma and a weld pool is presented for double electrodes tungsten inert gas welding. The model is validated by available experimental data. The distributions of temperature, velocity and pressure of the coupled arc plasma are investigated. The current density, heat flux and shear stress over the weld pool are highlighted. The weld pool dynamic is described by taking into account buoyance, Lorentz force, surface tension and plasma drag force. The turbulent effect in the weld pool is also considered. It is found that the temperature and velocity distributions of the coupled arc are not rotationally symmetrical. A similar property is also shown by the arc pressure, current density and heat flux at the anode surface. The surface tension gradient is much larger than the plasma drag force and dominates the convective pattern in the weld pool, thus determining the weld penetration. The anodic heat flux and plasma drag force, as well as the surface tension gradient over the weld pool, determine the weld shape and size. In addition, provided the welding current through one electrode increases and that through the other decreases, keeping the total current unchanged, the coupled arc behaviour and weld pool dynamic change significantly, while the weld shape and size show little change. The results demonstrate the necessity of a unified model in the study of the arc plasma and weld pool.

  13. Reduced electron temperature in a magnetized inductively-coupled plasma with internal coil

    SciTech Connect

    Arancibia Monreal, J.; Chabert, P.; Godyak, V.

    2013-10-15

    The effect of magnetic filtering on the electron energy distribution function is studied in an inductive discharge with internal coil coupling. The coil is placed inside the plasma and driven by a low-frequency power supply (5.8 MHz) which leads to a very high power transfer efficiency. A permanent dipole magnet may be placed inside the internal coil to produce a static magnetic field around 100 Gauss. The coil and the matching system are designed to minimize the capacitive coupling to the plasma. Capacitive coupling is quantified by measuring the radiofrequency (rf) plasma potential with a capacitive probe. Without the permanent magnet, the rf plasma potential is significantly smaller than the electron temperature. When the magnet is present, the rf plasma potential increases. The electron energy distribution function is measured as a function of space with and without the permanent magnet. When the magnet is present, electrons are cooled down to low temperature in the downstream region. This region of low electron temperature may be useful for plasma processing applications, as well as for efficient negative ion production.

  14. Investigation of large-area multicoil inductively coupled plasma sources using three-dimensional fluid model

    NASA Astrophysics Data System (ADS)

    Brcka, Jozef

    2016-07-01

    A multi inductively coupled plasma (ICP) system can be used to maintain the plasma uniformity and increase the area processed by a high-density plasma. This article presents a source in two different configurations. The distributed planar multi ICP (DM-ICP) source comprises individual ICP sources that are not overlapped and produce plasma independently. Mutual coupling of the ICPs may affect the distribution of the produced plasma. The integrated multicoil ICP (IMC-ICP) source consists of four low-inductance ICP antennas that are superimposed in an azimuthal manner. The identical geometry of the ICP coils was assumed in this work. Both configurations have highly asymmetric components. A three-dimensional (3D) plasma model of the multicoil ICP configurations with asymmetric features is used to investigate the plasma characteristics in a large chamber and the operation of the sources in inert and reactive gases. The feasibility of the computational calculation, the speed, and the computational resources of the coupled multiphysics solver are investigated in the framework of a large realistic geometry and complex reaction processes. It was determined that additional variables can be used to control large-area plasmas. Both configurations can form a plasma, that azimuthally moves in a controlled manner, the so-called “sweeping mode” (SM) or “polyphase mode” (PPM), and thus they have the potential for large-area and high-density plasma applications. The operation in the azimuthal mode has the potential to adjust the plasma distribution, the reaction chemistry, and increase or modulate the production of the radicals. The intrinsic asymmetry of the individual coils and their combined operation were investigated within a source assembly primarily in argon and CO gases. Limited investigations were also performed on operation in CH4 gas. The plasma parameters and the resulting chemistry are affected by the geometrical relation between individual antennas. The aim of

  15. Numerical and Experimental Investigation on the Attenuation of Electromagnetic Waves in Unmagnetized Plasmas Using Inductively Coupled Plasma Actuator

    NASA Astrophysics Data System (ADS)

    Lin, Min; Xu, Haojun; Wei, Xiaolong; Liang, Hua; Song, Huimin; Sun, Quan; Zhang, Yanhua

    2015-10-01

    The attenuation of electromagnetic (EM) waves in unmagnetized plasma generated by an inductively coupled plasma (ICP) actuator has been investigated both theoretically and experimentally. A numerical study is conducted to investigate the propagation of EM waves in multilayer plasma structures which cover a square flat plate. Experimentally, an ICP actuator with dimensions of 20 cm×20 cm×4 cm is designed to produce a steady plasma slab. The attenuation of EM waves in the plasma generated by the ICP actuator is measured by a reflectivity arch test method at incident waves of 2.3 GHz and 10.1 GHz, respectively. A contrastive analysis of calculated and measured results of these incident wave frequencies is presented, which suggests that the experiment accords well with our theory. As expected, the plasma slab generated by the ICP actuator can effectively attenuate the EM waves, which may have great potential application prospects in aircraft stealth. supported by National Natural Science Foundation of China (Nos. 51276197, 11472306 and 11402301)

  16. Pedestal Fueling Simulations with a Coupled Kinetic-kinetic Plasma-neutral Transport Code

    SciTech Connect

    D.P. Stotler, C.S. Chang, S.H. Ku, J. Lang and G.Y. Park

    2012-08-29

    A Monte Carlo neutral transport routine, based on DEGAS2, has been coupled to the guiding center ion-electron-neutral neoclassical PIC code XGC0 to provide a realistic treatment of neutral atoms and molecules in the tokamak edge plasma. The DEGAS2 routine allows detailed atomic physics and plasma-material interaction processes to be incorporated into these simulations. The spatial pro le of the neutral particle source used in the DEGAS2 routine is determined from the uxes of XGC0 ions to the material surfaces. The kinetic-kinetic plasma-neutral transport capability is demonstrated with example pedestal fueling simulations.

  17. Energy Conservation Tests of a Coupled Kinetic-kinetic Plasma-neutral Transport Code

    SciTech Connect

    Stotler, D. P.; Chang, C. S.; Ku, S. H.; Lang, J.; Park, G.

    2012-08-29

    A Monte Carlo neutral transport routine, based on DEGAS2, has been coupled to the guiding center ion-electron-neutral neoclassical PIC code XGC0 to provide a realistic treatment of neutral atoms and molecules in the tokamak edge plasma. The DEGAS2 routine allows detailed atomic physics and plasma-material interaction processes to be incorporated into these simulations. The spatial pro le of the neutral particle source used in the DEGAS2 routine is determined from the uxes of XGC0 ions to the material surfaces. The kinetic-kinetic plasma-neutral transport capability is demonstrated with example pedestal fueling simulations.

  18. Effects of coil location and injection flow rate in an inductively coupled RF plasma torch

    NASA Astrophysics Data System (ADS)

    Wei, D.; Apelian, D.; Farouk, B.

    1985-07-01

    A numerical model has been developed to investigate the effects of central carrier gas flow rate and coil location in an inductively coupled RF plasma torch. Solution algorithm is based on the primitive variable formulation of the Navier-Stokes equations and includes a pseudo two-dimensional electromagnetic field model. Computational results have shown that with increasing carrier gas flow rate, the plasma plume is penetrated and the back flow due to the magnetic pumping effects is diminished. This facilitates the delivery of powder particles into the discharge region. However, the plasma plume is also disturbed significantly thus enhancing power loss.

  19. Surface Modification of Nanometre Silicon Carbide Powder with Polystyrene by Inductively Coupled Plasma

    NASA Astrophysics Data System (ADS)

    Wei, Gang; Meng, Yuedong; Zhong, Shaofeng; Liu, Feng; Jiang, Zhongqing; Shu, Xingsheng; Ren, Zhaoxing; Wang, Xiangke

    2008-02-01

    An investigation was made into polystyrene (PS) grafted onto nanometre silicon carbide (SiC) particles. In our experiment, the grafting polymerization reaction was induced by a radio frequency (RF) inductively coupled plasma (ICP) treatment of the nanometre powder. FTIR (Fourier transform infrared spectrum) and XPS (X-ray photoelectron spectroscopy) results reveal that PS is grafted onto the surface of silicon carbide powder. An analysis is presented on the effectiveness of this approach as a function of plasma operating variables including the plasma treating power, treating time, and grafting reaction temperature and time.

  20. Temperature dependence of inductively coupled plasma assisted growth of TiN thin films.

    SciTech Connect

    Meng, W. J.; Curtis, T. J.; Rehn, L. E.; Baldo, P. M.; Materials Science Division; Louisiana State Univ.

    1999-11-01

    The use of low pressure high density plasmas to assist the synthesis of ceramic thin film materials is in its infancy. Using an inductively coupled plasma assisted magnetron sputtering system, we examine the dependence of plasma-assisted growth of TiN thin films on growth temperature at different ratios of ion flux to neutral atom flux. Our results indicate that a temperature independent densification of TiN films occurs above a certain ion to neutral atom flux ratio. As an example of this temperature independent densification, we demonstrate the formation of dense B1 TiN crystalline thin films at growth temperatures down to {approx}100 K.

  1. Deposition Of Materials Using A Simple Planar Coil Radio Frequency Inductively Coupled Plasma System

    SciTech Connect

    Ng, K. H.; Wong, C. S.; Yap, S. L.; Gan, S. N.

    2009-07-07

    A planar coil RF inductively coupled plasma (PC-RFICP) systems is set up for the purpose of thin film deposition. The system is powered by a 13.56 MHz, 550 W, 50 OMEGA RF generator. The RF power is transferred to the plasma via a planar induction coil. The impedance matching unit consists of an air core step-down transformer and a tunable vacuum capacitor. This system is used for the plasma enhanced chemical vapor deposition (PECVD) of diamond-like carbon (DLC) film on silicon substrate, and hydrogenated amorphous carbon (a-C:H) film.

  2. Development of very small-diameter, inductively coupled magnetized plasma device.

    PubMed

    Kuwahara, D; Mishio, A; Nakagawa, T; Shinohara, S

    2013-10-01

    In order to miniaturize a high-density, inductively coupled magnetized plasma or helicon plasma to be applied to, e.g., an industrial application and an electric propulsion field, small helicon device has been developed. The specifications of this device along with the experimental results are described. We have succeeded in generating high-density (~10(19) m(-3)) plasmas using quartz tubes with very small diameters of 10 and 20 mm, with a radio frequency power ~1200 and 700 W, respectively, in the presence of the magnetic field less than 1 kG. PMID:24182105

  3. Measurements of secondary scintillation in low-pressure CF4 with a SiPM, from a parallel-plate avalanche geometry

    NASA Astrophysics Data System (ADS)

    Cortesi, M.; Yurkon, J.; Stolz, A.

    2016-04-01

    In this work we report and discuss the characterization of the secondary scintillation light emitted by low-pressure tetrafluoromethane (CF4) during avalanche gas processes. The experimental setup consists of a Parallel Plate Avalanche Counter (PPAC) irradiated by 5.5 MeV alpha particles from a collimated 241-Am source. The PPAC is operated in CF4 at pressures ranging from 5 to 50 torr. The electroluminescence light is readout by a VUV-sensitive Multi-Pixel Photon Counter (MPPC, Hamamatsu), placed along the PPAC axial direction. The secondary scintillation yield at different operational pressures was computed from the correlation between avalanche charge and electroluminesce light, recorded on an event-by-event basis; it was found to be in the range of 0.01–0.15 photons/electron depending on the reduced field applied between the PPAC electrodes. The role of the quencher impurities is also briefly discussed. In addition, the coincidence resolving times (CRT) for 5.5 MeV α -particles crossing the PPAC has been measured; time resolutions of 600 picosecond were achieved at different pressures.

  4. Evaluation of precursor evaporation in Si nanoparticle synthesis by inductively coupled thermal plasmas

    NASA Astrophysics Data System (ADS)

    Colombo, V.; Ghedini, E.; Gherardi, M.; Sanibondi, P.

    2013-06-01

    The evaporation of a micro-sized silicon solid precursor in a laboratory scale inductively coupled thermal plasma system for nanoparticle synthesis is investigated numerically using a customized version of the commercial CFD code ANSYS FLUENT©. Two turbulence models—the standard k-ɛ and the Reynolds stress model—and two different models for the computation of vapour production from the heated precursor—evaporation at boiling point and vaporization driven by vapour concentration gradients—are compared. The choice of the turbulence model can considerably influence the estimation of vapour production because plasma temperature reduction by plasma-particle heat exchange is increased when the flow in the torch region is predicted to be laminar, whereas the choice of the model for particle evaporation may be critical when the plasma temperature is decreased by plasma-particle heat exchange to values close to the boiling point of the material treated.

  5. Inductively-Coupled RF Powered O2 Plasma as a Sterilization Source

    NASA Technical Reports Server (NTRS)

    Sharma, S. P.; Rao, M. V. V. S.; Cruden, B. A.; Meyyappan, M.; Mogul, R.; Khare, B.; Chan, S. L.; Arnold, James O. (Technical Monitor)

    2001-01-01

    Low-temperature or cold plasmas have been shown to be effective for the sterilization of sensitive medical devices and electronic equipment. Low-temperature plasma sterilization procedures possess certain advantages over other protocols such as ethylene oxide, gamma radiation, and heat due to the use of inexpensive reagents, the insignificant environmental impacts and the low energy requirements. In addition, plasmas may also be more efficacious in the removal of robust microorganisms due to their higher chemical reactivity. Together, these attributes render cold plasma sterilization as ideal for the surface decontamination requirements for NASA Planetary Protection. Hence, the work described in this study involves the construction, characterization, and application of an inductively-coupled, RF powered oxygen (O2) plasma.

  6. Uniformity of internal linear-type inductively coupled plasma source for flat panel display processing

    NASA Astrophysics Data System (ADS)

    Lim, Jong Hyeuk; Kim, Kyong Nam; Park, Jung Kyun; Lim, Jong Tae; Yeom, Geun Young

    2008-02-01

    The variation in plasma uniformity over an extremely large size inductively coupled plasma (ICP) source of 2750×2350mm2 was examined. An internal linear-type antenna called "double comb-type antenna" was used as the ICP source. A plasma density of ˜1.4×1011/cm3 could be obtained at 5mTorr Ar by applying 10kW rf power to the source at a frequency of 13.56MHz. An increase in rf power from 1to10kW improved the plasma uniformity over a substrate area of 2300×2000mm2 from 18.1% to 11.4%. The improvement in uniformity of the internal ICP source was attributed to the increase in plasma density near the wall.

  7. Inductively Coupled Plasma-Induced Etch Damage of GaN p-n Junctions

    SciTech Connect

    SHUL,RANDY J.; ZHANG,LEI; BACA,ALBERT G.; WILLISON,CHRISTI LEE; HAN,JUNG; PEARTON,S.J.; REN,F.

    1999-11-03

    Plasma-induced etch damage can degrade the electrical and optical performance of III-V nitride electronic and photonic devices. We have investigated the etch-induced damage of an Inductively Coupled Plasma (ICP) etch system on the electrical performance of mesa-isolated GaN pn-junction diodes. GaN p-i-n mesa diodes were formed by Cl{sub 2}/BCl{sub 3}/Ar ICP etching under different plasma conditions. The reverse leakage current in the mesa diodes showed a strong relationship to chamber pressure, ion energy, and plasma flux. Plasma induced damage was minimized at moderate flux conditions ({le} 500 W), pressures {ge}2 mTorr, and at ion energies below approximately -275 V.

  8. Nonrelativistic structure calculations of two-electron ions in a strongly coupled plasma environment

    SciTech Connect

    Bhattacharyya, S.; Saha, J. K.; Mukherjee, T. K.

    2015-04-01

    In this work, the controversy between the interpretations of recent measurements on dense aluminum plasma created with the Linac coherent light source (LCLS) x-ray free electron laser (FEL) and the Orion laser has been addressed. In both kinds of experiments, heliumlike and hydrogenlike spectral lines are used for plasma diagnostics. However, there exist no precise theoretical calculations for He-like ions within a dense plasma environment. The strong need for an accurate theoretical estimate for spectral properties of He-like ions in a strongly coupled plasma environment leads us to perform ab initio calculations in the framework of the Rayleigh-Ritz variation principle in Hylleraas coordinates where an ion-sphere potential is used. An approach to resolve the long-drawn problem of numerical instability for evaluating two-electron integrals with an extended basis inside a finite domain is presented here. The present values of electron densities corresponding to the disappearance of different spectral lines obtained within the framework of an ion-sphere potential show excellent agreement with Orion laser experiments in Al plasma and with recent theories. Moreover, this method is extended to predict the critical plasma densities at which the spectral lines of H-like and He-like carbon and argon ions disappear. Incidental degeneracy and level-crossing phenomena are being reported for two-electron ions embedded in strongly coupled plasma. Thermodynamic pressure experienced by the ions in their respective ground states inside the ion spheres is also reported.

  9. ''SensArray'' voltage sensor analysis in an inductively coupled plasma

    SciTech Connect

    Titus, M. J.; Hsu, C. C.; Graves, D. B.

    2010-01-15

    A commercially manufactured PlasmaVolt sensor wafer was studied in an inductively coupled plasma reactor in an effort to validate sensor measurements. A pure Ar plasma at various powers (25-420 W), for a range of pressures (10-80 mT), and bias voltages (0-250 V) was utilized. A numerical sheath simulation was simultaneously developed in order to interpret experimental results. It was found that PlasmaVolt sensor measurements are proportional to the rf-current through the sheath. Under conditions such that the sheath impedance is dominantly capacitive, sensor measurements follow a scaling law derived from the inhomogeneous sheath model of Lieberman and Lichtenberg, [Principles of Plasma Discharges and Materials Processing (Wiley, New York, 2005)]. Under these conditions, sensor measurements are proportional to the square root of the plasma density at the plasma-sheath interface, the one-fourth root of the electron temperature, and the one-fourth root of the rf bias voltage. When the sheath impedance becomes increasingly resistive, the sensor measurements deviate from the scaling law and tend to be directly proportional to the plasma density. The measurements and numerical sheath simulation demonstrate the scaling behavior as a function of changing sheath impedance for various plasma conditions.

  10. A dual-channel gas chromatography method for the quantitation of low and high concentrations of NF3 and CF4 to study membrane separation of the two compounds.

    PubMed

    Branken, D J; le Roux, J P; Krieg, H M; Lachmann, G

    2013-09-13

    A dual-channel gas chromatographic method is described in this paper that can be conveniently used for quantitation of NF3/CF4 mixtures with a thermal conductivity detector (TCD) on one channel for the quantitation of high-concentrations, and a pulsed discharge helium ionization detector (PDHID) on a second channel for the quantitation of low concentrations. It is shown that adequate separation is achieved on both channels with this dual single-column setup in which column switching as used for NF3/CF4 analysis in industrial chromatographic methods are not required, thus yielding an effective analysis method for laboratory-scale investigations. In addition, the use of packed columns with purified divinylbenzene-styrene co-polymers as the sole stationary phase yields satisfactory resolution between NF3 and CF4 at isothermal conditions of 30°C, with elution times of less than 8min on the TCD channel and less than 4min on the PDHID channel. Consequently, this method allows for reliable, straight-forward quantitation of NF3/CF4 mixtures, which is necessary when studying the commercially important problem of NF3 and CF4 separation by different methods. Therefore, the applicability of the method to studying membrane separation of NF3 and CF4 is briefly discussed and illustrated, for which the dual-channel setup is especially beneficial. PMID:23932026

  11. Residues of correlators in the strongly coupled N=4 plasma

    SciTech Connect

    Amado, Irene; Landsteiner, Karl; Montero, Sergio; Hoyos, Carlos

    2008-03-15

    Quasinormal modes of asymptotically AdS black holes can be interpreted as poles of retarded correlators in the dual gauge theory. To determine the response of the system to small external perturbations it is not enough to know the location of the poles: one also needs to know the residues. We compute them for R-charge currents and find that they are complex except for the hydrodynamic mode, whose residue is purely imaginary. For different quasinormal modes the residue grows with momentum q, whereas for the hydrodynamic mode it behaves as a damped oscillation with distinct zeroes at finite q. Similar to collective excitations at weak coupling the hydrodynamic mode decouples at short wavelengths. Knowledge of the residues allows as well to define the time scale {tau}{sub H} from when on the system enters the hydrodynamic regime, restricting the validity of hydrodynamic simulations to times t>{tau}{sub H}.

  12. Two Different Plasma Series Resonances in a 100MHz Driven Narrow Gap Capacitively Coupled Plasma

    NASA Astrophysics Data System (ADS)

    Choi, Myung-Sun; Lee, Seok-Hwan; Jang, Yunchang; Ryu, Sangwon; Jeong, Sangmin; Sung, Dougyong; Kim, Gon-Ho

    2014-10-01

    Plasma series resonance (PSR) is the resonance between the sheath displacement and the inductance of plasma bulk. Especially, the linear response of this resonance is called ``geometrical resonance'' which is distinguished with the non-linear response of that called ``self-excited PSR.'' In this work, geometrical series resonances of plasma slab in narrow gap (d = 0 . 02 m) between the RF electrode (r = 0 . 2 m) and floating electrode (r = 0 . 15 m) encircled with the earthed chamber (r = 0 . 3 m) were investigated with various applied 100 MHz powers from 100 W to 1 kW and operating pressures from 5 mTorr to 50 mTorr. The condition of plasma series resonance was monitored by using optical emission spectroscopy (OES) and amplitudes of current and voltage at the RF driven and counter electrodes. There were not only the plasma series resonance between the two parallel electrodes but also that between the RF driven electrode and the lateral wall of earthed chamber. Those two different plasma series resonances were observed alternatively with increasing applied power. In the session, the detailed analysis of alternatively arisen two different series resonances and influence of them on the discharge will be discussed. This work was partly supported by the Brain Korea 21 Plus Project (No. 21A20130012821).

  13. Induced magnetic-field effects in inductively coupled plasmas

    SciTech Connect

    Cohen, R.H.; Rognlien, T.D.

    1995-11-04

    In inductive plasma sources, the rapid spatial decay of the electric field arising from the skin effect produces a large radio frequency (RF) magnetic field via Faraday`s law. We previously determined that this magnetic field leads to a reduction of the electron density in the skin region, as well as a reduction in the collisionless heating rate. The electron deficit leads to the formation of an electrostatic potential which pulls electrons in to restore quasineutrality. Here we calculate the electron density including both the induced and electrostatic fields. If the wave frequency is not too low, the ions respond only to the averaged fields, and hence the electrostatic field is oscillatory, predominantly at the second harmonic of the applied field. We calculate the potential required to establish a constant electron density, and compare with numerical orbit-code calculations. For times short compared to ion transit times, the quasineutral density is just the initial ion density. For timescales long enough that the ions can relax, the density profile can be found from the solution of fluid equations with an effective (ponderomotive-like) potential added. Although the time-varying electrostatic potential is an extra source of heating, the net effect of the induced magnetic and electrostatic fields through trapping, early turning, and direct heating is a significant reduction in collisionless heating for parameters of interest.

  14. Shock structures in a strongly coupled self-gravitating opposite-polarity dust plasma

    NASA Astrophysics Data System (ADS)

    Mamun, A. A.; Schlickeiser, R.

    2016-03-01

    A strongly coupled, self-gravitating, opposite-polarity dust plasma (containing strongly coupled inertial positive and negative dust fluids, and inertialess weakly coupled ions) is considered. The generalized hydrodynamic model and the reductive perturbation method are employed to examine the possibility for the formation of the dust-acoustic (DA) shock structures in such an opposite-polarity dust plasma. It has been shown that the strong correlation among charged dust is a source of dissipation and is responsible for the formation of the DA shock structures in such the opposite-polarity dust plasma medium. The parametric regimes for the existence of the DA shock structures (associated with electrostatic and gravitational potentials) and their basic properties (viz., polarity, amplitude, width, and speed) are found to be significantly modified by the combined effects of positively charged dust component, self-gravitational field, and strong correlation among charged dust. The implications of our results in different space plasma environments and laboratory plasma devices are briefly discussed.

  15. INDUCTIVELY COUPLED PLASMA-ATOMIC EMISSION SPECTROMETRIC ANALYSIS OF ENVIRONMENTAL SAMPLES USING ULTRASONIC NEBULIZATION

    EPA Science Inventory

    Ultrasonic and pneumatic nebulizers used in inductively coupled plasma-atomic emission spectrometry (ICP-AES) are compared in the analysis of standard materials and environmental samples. Results verify that ICP-AES with ultrasonic nebulization is capable of lower detection limit...

  16. Determination of Arsenic in Sinus Wash and Tap Water by Inductively Coupled Plasma-Mass Spectrometry

    ERIC Educational Resources Information Center

    Donnell, Anna M.; Nahan, Keaton; Holloway, Dawone; Vonderheide, Anne P.

    2016-01-01

    Arsenic is a toxic element to which humans are primarily exposed through food and water; it occurs as a result of human activities and naturally from the earth's crust. An experiment was developed for a senior level analytical laboratory utilizing an Inductively Coupled Plasma-Mass Spectrometer (ICP-MS) for the analysis of arsenic in household…

  17. INTERLABORATORY STUDY OF INDUCTIVELY COUPLED PLASMA ATOMIC EMISSION SPECTROSCOPY METHOD 6010 AND DIGESTION METHOD 3050

    EPA Science Inventory

    The design, execution, and results of an interlaboratory study of Method 6010, 'Inductively Coupled Plasma Atomic Emission Spectroscopy,' are described. The study examined the application of the method to the analysis of solid-waste materials for 23 elements. Part of the interlab...

  18. Inductively coupled plasma-atomic emission spectroscopy: The determination of trace impurities in uranium hexafluoride

    NASA Astrophysics Data System (ADS)

    Floyd, M. A.; Morrow, R. W.; Farrar, R. B.

    An analytical method has been developed for the determination of trace impurities in high-purity uranium hexafluoride using liquid-liquid extraction of the uranium from the trace impurities followed by analysis with inductively coupled plasma-atomic emission spectroscopy. Detection limits, accuracy, and precision data are presented.

  19. Capacitively Coupled Radio Frequency Discharge Plasmas In Hydrogen: Particle Modeling and Negative Ion Kinetics

    SciTech Connect

    Diomede, P.; Longo, S.; Capitelli, M.

    2005-05-16

    We present a 1D(r)2D(v) particle code for capacitively coupled radio frequency discharge plasmas in hydrogen, which includes a rigorous kinetic modeling of ion transport and several solutions to speed up the convergence. In a test case the effect of surface atom recombination and molecule vibrational deactivation on H- concentration is investigated.

  20. ULTRASONIC NEBULIZATION AND ARSENIC VALENCE STATE CONSIDERATIONS PRIOR TO DETERMINATION VIA INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRY

    EPA Science Inventory

    An ultrasonic nebulizer (USN) was utilized as a sample introduction device for an inductively coupled plasma mass spectrometer in an attempt to increase the sensitivity for As. The USN produced a valence state response difference for As. The As response was suppressed approximate...

  1. DETERMINATION OF BROMATE IN DRINKING WATERS BY ION CHROMATOGRAPHY WITH INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRIC DETECTION

    EPA Science Inventory

    Bromate is a disinfection by-product in drinking water, formed during the ozonation of source water containing bromide. An inductively coupled plasma mass spectrometer is combined with an ion chromatograph for the analysis of bromate in drinking waters. Three chromatographic colu...

  2. INDUCTIVELY COUPLED ARGON PLASMA AS AN ION SOURCE FOR MASS SPECTROMETRIC DETERMINATION OF TRACE ELEMENTS

    EPA Science Inventory

    Solution aerosols are injected into an inductively coupled argon plasma (ICP) to generate a relatively high number density of positive ions derived from elemental constituents. A small fraction of these ions is extracted through a sampling orifice into a differentially pumped vac...

  3. Study of the Ionization Dynamics and Equation of State of a Strongly Coupled Plasma

    SciTech Connect

    Shepherd, R; Audebert, P; Geindre, J P; Iglesias, C; Foord, M; Rogers, F; Gauthier, J C; Springer, P

    2003-02-06

    Preliminary experiments to study the ionization dynamics and equation of state of a strongly coupled plasma have been performed at the LLNL COMET laser facility. In these experiment, a 1.0 J, 500 fs, 532 nm laser was used to create a uniform, warm dense plasma.The primary diagnostic, Fourier Domain Interferometry (FDI), was used to provide information about the position of the critical density of the target and thus the expansion hydrodynamics, laying the ground work for the plasma characterization. The plasmas were determined to be strongly coupled. In addition work was performed characterizing the back-lighter. A von Hamos spectrograph coupled to a 500 fs X-ray streak camera (TREX-VHS) developed at LLNL was used for these measurements. This diagnostic combines high collection efficiency ({approx} 10{sup -4} steradians) with fast temporal response ({approx} 500 fs), allowing resolution of extremely transient spectral variations. The TREX-VHS will be used to determine the time history, intensity, and spectral content of the back-lighter resulting in absorption measurements that provide insight into bound states in strongly coupled conditions.

  4. In situ calibration of inductively coupled plasma-atomic emission and mass spectroscopy

    DOEpatents

    Braymen, Steven D.

    1996-06-11

    A method and apparatus for in situ addition calibration of an inductively coupled plasma atomic emission spectrometer or mass spectrometer using a precision gas metering valve to introduce a volatile calibration gas of an element of interest directly into an aerosol particle stream. The present situ calibration technique is suitable for various remote, on-site sampling systems such as laser ablation or nebulization.

  5. Atlas of atomic spectral lines of plutonium emitted by an inductively coupled plasma

    SciTech Connect

    Edelson, M.C.; DeKalb, E.L.; Winge, R.K.; Fassel, V.A.

    1986-09-01

    Optical emission spectra from high-purity Pu-242 were generated with a glovebox-enclosed inductively coupled plasma (ICP) source. Spectra covering the 2280 to 7008 Angstrom wavelength range are presented along with general commentary on ICP-Pu spectroscopy.

  6. Non-Markovian Dynamics and Self-Diffusion in Strongly Coupled Plasmas

    NASA Astrophysics Data System (ADS)

    Strickler, Trevor; Langin, Thomas; McQuillen, Patrick; Daligault, Jerome; Maksimovich, Nikola; Killian, Thomas

    2015-11-01

    In weakly coupled plasmas, collisions are dominated by long range, small angle scattering, and each collision is an uncorrelated binary event. In contrast, collisions in strongly coupled plasmas (coupling parameter Γ > 1) are dominated by short range, large angle scattering in which the collisions may be correlated and non-independent in time, i.e., non-Markovian. In this work, we present experimental results indicative of non-Markovian processes in a strongly coupled ultracold neutral plasma (UCNP) created by photoionizing strontium atoms in a magneto-optical trap. We use optical pumping to create spin ``tagged'' subpopulations of ions having non-zero average velocity < v > , and use laser induced fluorescence (LIF) imaging to measure the relaxation of < v (t) > back to equilibrium. We observe clear non-exponential decay in < v (t) > , which indicates non-Markovian dynamics. We further demonstrate there is a theoretical basis to consider < v (t) > as an approximation to the ion velocity autocorrelation function (VAF). We then calculate diffusion coefficients from our data, demonstrating experimental measurement of self-diffusion coefficients for 0 . 3 < Γ < 3 . 5 . This work was supported by the United States National Science Foundation and Department of Energy Partnership in Basic Plasma Science and Engineering (PHY-1102516) and the Air Force Office of Scientific Research (FA9550- 12-1-0267).

  7. Spectroscopic Measurements of Collision-less Coupling Between Laser-Produced, Super-Alfvénic Debris Plasmas and Magnetized, Ambient Plasmas

    NASA Astrophysics Data System (ADS)

    Bondarenko, Anton; Everson, E.; Schaeffer, D.; Constantin, C.; Vincena, S.; Van Compernolle, B.; Clark, S.; Niemann, C.

    2013-06-01

    Emission spectroscopy is currently being utilized in order to assess collision-less momentum and energy coupling between super-Alfvénic debris plasmas and magnetized, ambient plasmas of astrophysical relevance. In a recent campaign on the Large Plasma Device (LAPD) utilizing the Phoenix laboratory Raptor laser (130 J, 25 ns FWHM), laser-ablated carbon debris plasmas were generated within magnetized, ambient helium plasmas (nelec ≈ 3×1012 cm-3, Telec ≈ 5.5 eV, B0 = 200 G), and prominent spectral lines of carbon and helium ions were studied in high resolution (˜ 0.01 nm). Time-resolved Doppler shift and width measurements of a C V ion spectral line reveal significant deceleration as the ions stream through the background plasma, which may indirectly indicate momentum coupling. Spectral lines of He II ions are observed to intensify by orders of magnitude and broaden, indicating energy transfer from the debris plasma to the background plasma.

  8. Resistive wall mode and neoclassical tearing mode coupling in rotating tokamak plasmas

    NASA Astrophysics Data System (ADS)

    McAdams, Rachel; Wilson, H. R.; Chapman, I. T.

    2013-08-01

    A model system of equations has been derived to describe a toroidally rotating tokamak plasma, unstable to resistive wall modes (RWMs) and metastable to neoclassical tearing modes (NTMs), using a linear RWM model and a nonlinear NTM model. If no wall is present, the NTM growth shows the typical threshold/saturation island widths, whereas a linearly unstable kink mode grows exponentially in this model plasma system. When a resistive wall is present, the growth of the linearly unstable RWM is accelerated by an unstable island: a form of coupled RWM-NTM mode. Crucially, this coupled system has no threshold island width, giving the impression of a triggerless NTM, observed in high beta tokamak discharges. Increasing plasma rotation at the island location can mitigate its growth, decoupling the modes to yield a conventional RWM with no threshold width.

  9. Plasma Characteristics of Large Area Inductively Coupled Plasma System Using Ferrite-Module-Enhanced U-Type Antenna

    NASA Astrophysics Data System (ADS)

    Kim, Kyong Nam; Hyeuk Lim, Jong; Yeom, Geun Young

    2009-11-01

    A ferrite-module-enhanced internal-type linear inductively coupled plasma (ICP) source having multiple U-type antennas operated at 2 MHz has been proposed as a promising candidate to serve as an efficient high-density plasma source for plasma processing areas larger than 2,000×2,300 mm2. When the ICP source was operated at 2 MHz RF power with the ferrite module, high density plasmas on the order of 2.9×1011 cm-3 were obtained at 10 mTorr Ar by applying 4 kW RF power/one U-type antenna; this is 1.5 times higher than the densities obtained at 13.56 MHz without the ferrite module. The higher plasma density obtained with the ICP source operated at 2 MHz with the ferrite module compared with that operated at 13.56 MHz without the ferrite module is related to the magnetic field enhancement caused by the ferrite module. The etch uniformity on a substrate of 2,300×2,000 mm2 at 15 mTorr Ar/O2 (7:3) and about 2.3 kW/U-type antenna was about 11%.

  10. Influence of finite geometrical asymmetry of the electrodes in capacitively coupled radio frequency plasma

    SciTech Connect

    Bora, B. Soto, L.

    2014-08-15

    Capacitively coupled radio frequency (CCRF) plasmas are widely studied in last decades due to the versatile applicability of energetic ions, chemically active species, radicals, and also energetic neutral species in many material processing fields including microelectronics, aerospace, and biology. A dc self-bias is known to generate naturally in geometrically asymmetric CCRF plasma because of the difference in electrode sizes known as geometrical asymmetry of the electrodes in order to compensate electron and ion flux to each electrode within one rf period. The plasma series resonance effect is also come into play due to the geometrical asymmetry and excited several harmonics of the fundamental in low pressure CCRF plasma. In this work, a 13.56 MHz CCRF plasma is studied on the based on the nonlinear global model of asymmetric CCRF discharge to understand the influences of finite geometrical asymmetry of the electrodes in terms of generation of dc self-bias and plasma heating. The nonlinear global model on asymmetric discharge has been modified by considering the sheath at the grounded electrode to taking account the finite geometrical asymmetry of the electrodes. The ion density inside both the sheaths has been taken into account by incorporating the steady-state fluid equations for ions considering that the applied rf frequency is higher than the typical ion plasma frequency. Details results on the influences of geometrical asymmetry on the generation of dc self-bias and plasma heating are discussed.

  11. Self-Diffusion and Non-Markovian Dynamics in Strongly Coupled Ultracold Neutral Plasmas

    NASA Astrophysics Data System (ADS)

    Strickler, Trevor; Langin, Thomas; McQuillen, Patrick; Killian, Thomas

    2015-05-01

    Collisional processes in weakly coupled plasmas are well-described by the Landau-Spitzer formalism. Classical plasma theory breaks down, however, in strongly coupled systems because of the non-perturbative nature of particle interactions, and improving our understanding of this regime is an important fundamental challenge. We present experimental measurements of the self-diffusion constant and observation of non-Markovian equilibration for strongly coupled ions in an ultracold neutral plasma (UCNP) created by photoionizing strontium atoms in a magneto-optical trap. Our diagnostic uses optical pumping to create ``spin-tagged'' subpopulations of ions having skewed velocity distributions that then relax back to equilibrium. A Green-Kubo relation is used to extract the self-diffusion constant from the equilibration curves. With improved time resolution (down to 30 ns), we have explored the early time dynamics of these skewed ion distributions within 100 ns after the optical pumping, where molecular dynamics simulations predict non-Markovian deviations from the exponential velocity damping expected for weakly coupled systems. At longer times, we observe oscillations of the average velocity during the relaxation, which indicate coupling of single-particle motion to collective modes. This work was supported by the United States National Science Foundation and the Department of Energy (PHY-0714603), and the Air Force Office of Scientific Research (FA9550-12-1-0267).

  12. Lithium Iron Phosphate Powders and Coatings Obtained by Means of Inductively Coupled Thermal Plasma

    NASA Astrophysics Data System (ADS)

    Major, K.; Veilleux, J.; Brisard, G.

    2016-01-01

    Lithium-ion batteries have high energy efficiency and good cycling life and are considered as one of the best energy storage device for hybrid and/or electrical vehicle. Still, several problems must be solved prior to a broad adoption by the automotive industry: energy density, safety, and costs. To enhance both energy density and safety, the current study aims at depositing binder-free cathode materials using inductively coupled thermal plasma. In a first step, lithium iron phosphate (LiFePO4) powders are synthesized in an inductively coupled thermal plasma reactor and dispersed in a conventional polyvinylidene fluoride (PVDF) binder. Then, binder-free LiFePO4 coatings are directly deposited onto nickel current collectors by solution precursor plasma spraying (SPPS). The morphology, microstructure, and composition of the synthesized LiFePO4 powders and coatings are fully characterized by electronic microscopy, x-ray diffraction, and x-ray photoelectron spectroscopy (XPS). Quantifying Li with XPS requires the substitution of iron with manganese in the SPPS precursors (LiMPO4, where M = Fe or Mn). The plasma-derived cathodes (with and without PVDF binder) are assembled in button cells and tested. Under optimized plasma conditions, cyclic voltammetry shows that the electrochemical reversibility of plasma-derived cathodes is improved over that of conventional sol-gel-derived LiFePO4 cathodes.

  13. Use of external magnetic fields in hohlraum plasmas to improve laser-coupling

    SciTech Connect

    Montgomery, D. S. Albright, B. J.; Kline, J. L.; Yin, L.; Barnak, D. H.; Chang, P. Y.; Davies, J. R.; Fiksel, G.; Froula, D. H.; Betti, R.; MacDonald, M. J.; Sefkow, A. B.

    2015-01-15

    Efficient coupling of laser energy into hohlraum targets is important for indirect drive ignition. Laser-plasma instabilities can reduce coupling, reduce symmetry, and cause preheat. We consider the effects of an external magnetic field on laser-energy coupling in hohlraum targets. Experiments were performed at the Omega Laser Facility using low-Z gas-filled hohlraum targets which were placed in a magnetic coil with B{sub z} ≤ 7.5-T. We found that an external field B{sub z} = 7.5-T aligned along the hohlraum axis results in up to a 50% increase in plasma temperature as measured by Thomson scattering. The experiments were modeled using the 2-D magnetohydrodynamics package in HYDRA and were found to be in good agreement.

  14. Use of external magnetic fields in hohlraum plasmas to improve laser-coupling

    NASA Astrophysics Data System (ADS)

    Montgomery, D. S.; Albright, B. J.; Barnak, D. H.; Chang, P. Y.; Davies, J. R.; Fiksel, G.; Froula, D. H.; Kline, J. L.; MacDonald, M. J.; Sefkow, A. B.; Yin, L.; Betti, R.

    2015-01-01

    Efficient coupling of laser energy into hohlraum targets is important for indirect drive ignition. Laser-plasma instabilities can reduce coupling, reduce symmetry, and cause preheat. We consider the effects of an external magnetic field on laser-energy coupling in hohlraum targets. Experiments were performed at the Omega Laser Facility using low-Z gas-filled hohlraum targets which were placed in a magnetic coil with Bz ≤ 7.5-T. We found that an external field Bz = 7.5-T aligned along the hohlraum axis results in up to a 50% increase in plasma temperature as measured by Thomson scattering. The experiments were modeled using the 2-D magnetohydrodynamics package in HYDRA and were found to be in good agreement.

  15. Use of external magnetic fields in hohlraum plasmas to improve laser-coupling

    DOE PAGESBeta

    Montgomery, D. S.; Albright, B. J.; Barnak, D. H.; Chang, P. Y.; Davies, J. R.; Fiksel, G.; Froula, D. H.; Kline, J. L.; MacDonald, M. J.; Sefkow, A. B.; et al

    2015-01-13

    Efficient coupling of laser energy into hohlraum targets is important for indirect drive ignition. Laser-plasma instabilities can reduce coupling, reduce symmetry, and cause preheat. We consider the effects of an external magnetic field on laser-energy coupling in hohlraum targets. Experiments were performed at the Omega Laser Facility using low-Z gas-filled hohlraum targets which were placed in a magnetic coil with Bz ≤ 7.5-T. We found that an external field Bz = 7.5-T aligned along the hohlraum axis results in up to a 50% increase in plasma temperature as measured by Thomson scattering. As a result, the experiments were modeled usingmore » the 2-D magnetohydrodynamics package in HYDRA and were found to be in good agreement.« less

  16. Use of external magnetic fields in hohlraum plasmas to improve laser-coupling

    SciTech Connect

    Montgomery, D. S.; Albright, B. J.; Barnak, D. H.; Chang, P. Y.; Davies, J. R.; Fiksel, G.; Froula, D. H.; Kline, J. L.; MacDonald, M. J.; Sefkow, A. B.; Yin, L.; Betti, R.

    2015-01-13

    Efficient coupling of laser energy into hohlraum targets is important for indirect drive ignition. Laser-plasma instabilities can reduce coupling, reduce symmetry, and cause preheat. We consider the effects of an external magnetic field on laser-energy coupling in hohlraum targets. Experiments were performed at the Omega Laser Facility using low-Z gas-filled hohlraum targets which were placed in a magnetic coil with Bz ≤ 7.5-T. We found that an external field Bz = 7.5-T aligned along the hohlraum axis results in up to a 50% increase in plasma temperature as measured by Thomson scattering. As a result, the experiments were modeled using the 2-D magnetohydrodynamics package in HYDRA and were found to be in good agreement.

  17. Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)

    SciTech Connect

    Ando, Ayumi; Kurose, Tomoko; Kitano, Katsuhisa; Hamaguchi, Satoshi; Reymond, Vivien; Kitahara, Hideaki; Takano, Keisuke; Hangyo, Masanori; Tani, Masahiko

    2011-10-01

    The electron densities of argon inductively coupled plasmas were measured by terahertz time-domain spectroscopy (THz-TDS). At a low pressure, the electron densities were also measured with a Langmuir-type double probe and the validity of THz-TDS electron-density measurement in a plasma has been corroborated. As the input radio-frequency (RF) power increases, the plasma density and gas temperature increase, which makes the probe measurement less reliable or even impossible, due to the large heat load to the probe surface. On the contrary, the THz-TDS measurement is unaffected by the gas temperature and becomes more reliable due to the higher electron density at higher input power for plasma generation.

  18. New Applications of Inductively Coupled Plasma-Mass Spectrometry in the Nuclear Industry

    SciTech Connect

    Rob Henry; Dagmar Koller; Phil Marriott

    1998-12-31

    Inductively coupled plasma mass spectrometry (ICP-MS) complements the traditional methods of quantitation of radioactive isotopes. Because of the favorable ionization potential of most actinides and their daughter products, the argon plasma provides a rich, stable source of ions, which are introduced through a plasma-mass spectrometer interface into the mass spectrometer for isotopic separation. Samples are normally introduced in solution, although direct solids analysis has also been achieved using laser ablation of the sample into the argon plasma. Since 1983, improvements in ICP-MS sensitivity have resulted in correspondingly lower mass detection capability. This development has in turn expanded the number of isotopes accessible to measurement at the levels required in the nuclear industry.

  19. Current-free double-layer formation in inductively coupled plasma in a uniform magnetic field

    SciTech Connect

    Popescu, S.; Ohtsu, Y.; Fujita, H.

    2006-06-15

    The axial profiles of plasma parameters for low and moderate pressures, such as the plasma potential, electron temperature, and number density, have been evaluated in magnetized inductively coupled plasma. The experimental results revealed in both cases the existence of a genuine current-free double-layer structure, separating two plasma regions with different properties. Based on the experimental results, a physical scenario for the self-assembling of the double layer is proposed. Also, the axial profile of the electron number density downstream is analyzed, emphasizing the role of neutral metastable ionization, and a simple analytical model is developed to fit the experimental data. The model allows the estimation of neutral metastable number density downstream and the recombination rate coefficient.

  20. Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect

    NASA Astrophysics Data System (ADS)

    Lafleur, T.

    2016-02-01

    Unequal areas of the powered and grounded electrodes in single-frequency capacitively coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an asymmetric plasma response. By instead applying non-sinusoidal waveforms composed of multiple harmonics—referred to in the literature as arbitrary waveforms, multi-harmonic waveforms or tailored waveforms—an asymmetric plasma response and a DC self-bias can also be produced; even for perfectly geometrically symmetric systems. This electrical asymmetry effect (EAE) has opened the doors to a wide range of novel ideas and interesting new physics that could allow limitations between the control of the ion flux and ion energy in traditional CCPs to be broken; thus helping to develop next-generation industrial plasma processing reactors. This review is dedicated to the current status of the EAE, and highlights important theoretical, numerical and experimental work in the field that has contributed to our understanding.

  1. Single laser pulse compression via strongly coupled stimulated Brillouin scattering in plasma

    NASA Astrophysics Data System (ADS)

    Peng, H.; Wu, Z. H.; Zuo, Y. L.; Zhang, Z. M.; Zhou, K. N.; Su, J. Q.

    2016-07-01

    Laser amplification in plasma, including stimulated Raman scattering amplification and strongly coupled stimulated Brillouin scattering (sc-SBS) amplification, is very promising to generate ultrahigh-power and ultrashort laser pulses. But both are quite complex in experiments: at least three different laser pulses must be prepared; temporal delay and spatial overlap of these three pulses are difficult. We propose a single pulse compression scheme based on sc-SBS in plasma. Only one moderately long laser is applied, the front part of which ionizes the gas to produced plasma, and gets reflected by a plasma mirror at the end of the gas channel. The reflected front quickly depletes the remaining part of the laser by sc-SBS in the self-similar regime. The output laser is much stronger and shorter. This scheme is at first considered theoretically, then validated by using 1D PIC simulations.

  2. Suppression of ionization instability in a magnetohydrodynamic plasma by coupling with a radio-frequency electromagnetic field

    SciTech Connect

    Murakami, Tomoyuki; Okuno, Yoshihiro; Yamasaki, Hiroyuki

    2005-05-09

    We describe the suppression of ionization instability and the control of a magnetohydrodynamic electrical power-generating plasma by coupling with a radio-frequency (rf) electromagnetic field. The rf heating stabilizes the unstable plasma behavior and homogenizes the nonuniform plasma structure, whereby the power-generating performance is significantly improved.

  3. SOLUTION NEBULIZATION OF AQUEOUS SAMPLES INTO THE TUBULAR-ELECTRODE TORCH CAPACITATIVELY-COUPLED MICROWAVE PLASMA (JOURNAL VERSION)

    EPA Science Inventory

    The work shows the feasibility of using nebulization for introduction of aqueous samples into the tubular-torch capacitatively-coupled microwave plasma (CMP). Previously, solid electrodes were used with this type of plasma, in which analyte carrier and plasma support gases are pr...

  4. Measurements of CF4 and C2F6 in the emissions from aluminum smelters by tunable diode laser absorption spectrometry

    NASA Astrophysics Data System (ADS)

    Schiff, Harold I.; Bechara, J.; Pisano, John T.; Mackay, Gervase I.

    1994-06-01

    Because of their very long atmospheric lifetimes the two perfluorocarbons, CF4 and C2F6 have `global warming potentials' tens of thousands times greater than CO2. Aluminum smelting is believed to be the major source of these gases in the atmosphere although there is a great deal of uncertainty in the global emissions from this source. The emissions occur largely during `anode event' episodes. A tunable diode laser absorption spectrometer was used to measure the emissions of these gases from 8 smelters in the Province of Quebec which represent different technologies and contribute 11% to the total global production of aluminum. The results show that there is considerable variability in emissions between technologies, and in the intensity, the shape and the duration of the anode events with an apparent relationship between the duration and the fluxes during the anode events.

  5. Capacitively Coupled RF Plasmas for the Synthesis of Silicon Nanocrystals: Scaling and Mechanisms

    NASA Astrophysics Data System (ADS)

    Markosyan, Aram H.; Le Picard, Romain; Porter, David H.; Girshick, Steven L.; Kushner, Mark J.

    2015-09-01

    Silicon nanocrystals (SNCs) are of interest for light emitting electronics, photovoltaics, and biotechnology. SNCs are produced in low pressure capacitively coupled plasmas (CCPs) sustained in SiH4 containing mixtures. To optimize these applications, it is necessary to control the size distribution of the SNCs. Particles 3-5 nm diameter are typically tailored by flow rates and power, however the fundamental processes responsible for this size control are not well understood. We developed a 2-d computer model for RF powered CCPs to predict the synthesis of SNCs. An aerosol sectional model was incorporated into the Hybrid Plasma Equipment Model. The reactor is a quartz tube a few mm in diameter through which 100 sccm Ar and 15 sccm He/SiH4 = 95/5 at 2 Torr are flowed. The SNC residence time is 1-2 ms in the dense plasma region near the electrodes. We found that the distribution of plasma potential is important in determining the growth and size distribution of the SNCs. The SNCs having long residence times in the plasma, thereby enabling growth, are usually negatively charged. To ultimately allow these SNCs to flow out of the plasma, the distribution of the plasma potential must enable the particles to be entrained in the neutral gas flow without a significant potential barrier. We also found that agglomeration of particles of <1 nm is important in the rate of growth of SNCs. Work supported by DOE (DE-SC0001939) and NSF (CHE-124752).

  6. A novel double hohlraum target to create a moderately coupled plasma for ion stopping experiments

    NASA Astrophysics Data System (ADS)

    Ortner, A.; Faik, S.; Schumacher, D.; Basko, M. M.; Blazevic, A.; Busold, S.; Bedacht, S.; Cayzac, W.; Frank, A.; Kraus, D.; Rienecker, T.; Schaumann, G.; Tauschwitz, An.; Wagner, F.; Roth, M.

    2015-01-01

    We present a new double hohlraum target for the creation of a moderately coupled (0.1 < Γ < 1) carbon plasma for energy loss and charge state measurements of projectile ions interacting with this plasma. A spherical cavity of 600 μm in diameter is heated with a 150-J laser pulse (λL = 527nm) within 1.2ns to produce a quasi-Planckian X-ray source with a radiation temperature of Tr ≈ 100eV . These X-rays are then used to heat volumetrically two thin carbon foils in a secondary cylindrical hohlraum to a dense plasma state. An axi-symmetric plasma column with a free-electron density of up to 8 ×1021cm-3, a temperature of T ≈ 10 eV, and an average ionization degree of Z ≈ 3 is generated. This plasma stays in a dense and an almost uniform state for about 5ns . Ultimately, such targets are supposed to be used in experiments where a heavy ion beam is launched through the sample plasma, and the ion energy losses as well as the charge distributions are to be measured. The present paper is in a certain sense a symbiotic one, where the theoretical analysis and the experimental results are combined to investigate the basic properties and the prospects of this type of plasma targets.

  7. On-line elemental analysis of fossil fuel process streams by inductively coupled plasma spectrometry

    SciTech Connect

    Chisholm, W.P.

    1995-06-01

    METC is continuing development of a real-time, multi-element plasma based spectrometer system for application to high temperature and high pressure fossil fuel process streams. Two versions are under consideration for development. One is an Inductively Coupled Plasma system that has been described previously, and the other is a high power microwave system. The ICP torch operates on a mixture of argon and helium with a conventional annular swirl flow plasma gas, no auxiliary gas, and a conventional sample stream injection through the base of the plasma plume. A new, demountable torch design comprising three ceramic sections allows bolts passing the length of the torch to compress a double O-ring seal. This improves the reliability of the torch. The microwave system will use the same data acquisition and reduction components as the ICP system; only the plasma source itself is different. It will operate with a 750-Watt, 2.45 gigahertz microwave generator. The plasma discharge will be contained within a narrow quartz tube one quarter wavelength from a shorted waveguide termination. The plasma source will be observed via fiber optics and a battery of computer controlled monochromators. To extract more information from the raw spectral data, a neural net computer program is being developed. This program will calculate analyte concentrations from data that includes analyte and interferant spectral emission intensity. Matrix effects and spectral overlaps can be treated more effectively by this method than by conventional spectral analysis.

  8. Coupled discretization of multicomponent diffusion problems in equilibrium and non-equilibrium plasmas

    NASA Astrophysics Data System (ADS)

    Peerenboom, Kim; Ten Thije Boonkkamp, Jan; van Dijk, Jan; Kroesen, Gerrit

    2013-09-01

    Solving balance equations is the essence of any fluid simulation of reactive, multicomponent plasmas. For plasmas in chemical non-equilibrium, balance equations are solved for all species of interest. When reactions are very fast with respect to transport time scales - and the plasma approaches chemical equilibrium - species abundances can be obtained from equilibrium relations. However, in many cases, balance equations still need to be solved for the elements, since the elemental composition can vary significantly in reactive multicomponent plasmas. Both in equilibrium and in non-equilibrium the species diffusive fluxes in these balance equations are governed by the Stefan-Maxwell equations. The use of Stefan-Maxwell diffusion leads to a coupled set of balance equations. Furthermore, this coupled set of equations is subject to charge and mass conservation constraints. Due to these complications the set of balance equations is often artificially decoupled to fit in the traditional finite volume discretization schemes and the constraints are explicitly applied. This approach can lead to very poor convergence behavior. We will present a new approach using a finite volume discretization scheme that takes into account the coupling and treats the constraints implicitly.

  9. Longitudinal singular response of dusty plasma medium in weak and strong coupling limits

    SciTech Connect

    Kumar Tiwari, Sanat; Das, Amita; Kaw, Predhiman; Sen, Abhijit

    2012-01-15

    The longitudinal response of a dusty plasma medium in both weak and strong coupling limits has been investigated in detail using analytic as well as numerical techniques. In particular, studies on singular response of the medium have been specifically investigated here. A proper Galilean invariant form of the generalized hydrodynamic fluid model has been adopted for the description of the dusty plasma medium. For weak non-linear response, analytic reductive perturbative approach has been adopted. It is well known that in the weak coupling regime for the dusty plasma medium, such an analysis leads to the Korteweg-de Vries equation (KdV) equation and predicts the existence of localized smooth soliton solutions. We show that the strongly coupled dust fluid with the correct Galilean invariant form does not follow the KdV paradigm. Instead, it reduces to the form of Hunter-Saxton equation, which does not permit soliton solutions. The system in this case displays singular response with both conservative as well as dissipative attributes. At arbitrary high amplitudes, the existence and spontaneous formation of sharply peaked cusp structures in both weak and strong coupling regimes has been demonstrated numerically.

  10. Linear and nonlinear heavy ion-acoustic waves in a strongly coupled plasma

    SciTech Connect

    Ema, S. A. Mamun, A. A.; Hossen, M. R.

    2015-09-15

    A theoretical study on the propagation of linear and nonlinear heavy ion-acoustic (HIA) waves in an unmagnetized, collisionless, strongly coupled plasma system has been carried out. The plasma system is assumed to contain adiabatic positively charged inertial heavy ion fluids, nonextensive distributed electrons, and Maxwellian light ions. The normal mode analysis is used to study the linear behaviour. On the other hand, the well-known reductive perturbation technique is used to derive the nonlinear dynamical equations, namely, Burgers equation and Korteweg-de Vries (K-dV) equation. They are also numerically analyzed in order to investigate the basic features of shock and solitary waves. The adiabatic effects on the HIA shock and solitary waves propagating in such a strongly coupled plasma are taken into account. It has been observed that the roles of the adiabatic positively charged heavy ions, nonextensivity of electrons, and other plasma parameters arised in this investigation have significantly modified the basic features (viz., polarity, amplitude, width, etc.) of the HIA solitary/shock waves. The findings of our results obtained from this theoretical investigation may be useful in understanding the linear as well as nonlinear phenomena associated with the HIA waves both in space and laboratory plasmas.

  11. Parametric Study of Plasma Torch Operation Using a MHD Model Coupling the Arc and Electrodes

    NASA Astrophysics Data System (ADS)

    Alaya, M.; Chazelas, C.; Vardelle, A.

    2016-01-01

    Coupling of the electromagnetic and heat transfer phenomena in a non-transferred arc plasma torch is generally based on a current density profile and a temperature imposed on the cathode surface. However, it is not possible to observe the current density profile experimentally and so the computations are grounded on an estimation of current distribution at cathode tip. To eliminate this boundary condition and be able to predict the arc dynamics in the plasma torch, the cathode was included in the computational domain, the arc current was imposed on the rear surface of the cathode, and the electromagnetism and energy conservation equations for the fluid and the electrode were coupled and solved. The solution of this system of equations was implemented in a CFD computer code to model various plasma torch operating conditions. The model predictions for various arc currents were consistent and indicated that such a model could be applied with confidence to plasma torches of different geometries, such as cascaded-anode plasma torches.

  12. Linear and nonlinear heavy ion-acoustic waves in a strongly coupled plasma

    NASA Astrophysics Data System (ADS)

    Ema, S. A.; Hossen, M. R.; Mamun, A. A.

    2015-09-01

    A theoretical study on the propagation of linear and nonlinear heavy ion-acoustic (HIA) waves in an unmagnetized, collisionless, strongly coupled plasma system has been carried out. The plasma system is assumed to contain adiabatic positively charged inertial heavy ion fluids, nonextensive distributed electrons, and Maxwellian light ions. The normal mode analysis is used to study the linear behaviour. On the other hand, the well-known reductive perturbation technique is used to derive the nonlinear dynamical equations, namely, Burgers equation and Korteweg-de Vries (K-dV) equation. They are also numerically analyzed in order to investigate the basic features of shock and solitary waves. The adiabatic effects on the HIA shock and solitary waves propagating in such a strongly coupled plasma are taken into account. It has been observed that the roles of the adiabatic positively charged heavy ions, nonextensivity of electrons, and other plasma parameters arised in this investigation have significantly modified the basic features (viz., polarity, amplitude, width, etc.) of the HIA solitary/shock waves. The findings of our results obtained from this theoretical investigation may be useful in understanding the linear as well as nonlinear phenomena associated with the HIA waves both in space and laboratory plasmas.

  13. Study on the O2 Plasma Treatment of Indium Tin Oxide for Organic Light Emitting Diodes Using Inductively Coupled Plasma

    NASA Astrophysics Data System (ADS)

    Jeong, Chang Hyun; Lee, June Hee; Lim, Jong Hyeuk; Lim, Jong Tae; Yeom, Geun Young

    2006-04-01

    In this study, the effect of O2 inductively coupled plasma (ICP) conditions for the indium tin oxide (ITO) surface treatment on the organic light emitting diode (OLED) device performances were investigated. By the O2 plasma treatment of ITO glass, better OLED device performances such as a lower turn-on voltage, a higher luminescence, and a higher power efficiency could be obtained and the use of lower oxygen pressure and higher ICP power improved the device properties further. DC-biasing of the ITO glass substrate degraded the device properties. The use of lower oxygen pressure and higher ICP power increased the densities of O2+ and O* in the plasma, and the plasma-treated ITO surface showed a lower carbon, a higher O/(Sn+In), and a higher Sn4+/In for the condition of lower oxygen pressure and higher ICP power. The improved OLED device properties with the ITO treated at the higher ICP power and the lower pressure appear to be from the increased hole injection to the OLED materials by decreasing the resistance of ITO and by increasing the work function of the ITO.

  14. Correlation between vibrational temperature of N2 and plasma parameters in inductively coupled Ar/N2 plasmas

    NASA Astrophysics Data System (ADS)

    Kim, Young-Cheol; Lee, Hyo-Chang; Kim, Yu-Sin; Chung, Chin-Wook

    2015-08-01

    Vibrational temperature (Tvib) of N2 gas and electron energy distribution function (EEDF) were measured in Ar/N2 mixture inductively coupled plasma (ICP). At a low gas pressure of 5 mTorr where the EEDF is bi-Maxwellian distribution, plasma density np and Tvib (from 7000 K to 5600 K) slightly decrease. However, remarkable decrease in np and Tvib is found with the dilution of N2 gas at a high gas pressure of 50 mTorr, where the EEDF is depleted Maxwellian distribution at a fixed ICP power of 150 W. When the ICP power increases from 150 W to 300 W at the gas pressure of 50 mTorr, the depleted tail on the EEDF is replenished, while np is little changed with the dilution of N2 gas. In this case, Tvib slightly decreases from 9500 K to 7600 K. These results indicate that the variation of Tvib is strongly correlated to the plasma parameters, such as the plasma density and EEDF.

  15. Plasma sterilization of Geobacillus Stearothermophilus by O{mathsf2}:N{mathsf2} RF inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Kylián, O.; Sasaki, T.; Rossi, F.

    2006-05-01

    The aim of this work is to identify the main process responsible for sterilization of Geobacillus Stearothermophilus spores in O{2}:N{2} RF inductively coupled plasma. In order to meet this objective the sterilization efficiencies of discharges in mixtures differing in the initial O{2}/N{2} ratios are compared with plasma properties and with scanning electron microscopy images of treated spores. According to the obtained results it can be concluded that under our experimental conditions the time needed to reach complete sterilization is more related to O atom density than UV radiation intensity, i.e. complete sterilization is not related only to DNA damage as in UV sterilization but more likely to the etching of the spore.

  16. Simulation of Main Plasma Parameters of a Cylindrical Asymmetric Capacitively Coupled Plasma Micro-Thruster using Computational Fluid Dynamics

    NASA Astrophysics Data System (ADS)

    Greig, Amelia; Charles, Christine; Boswell, Roderick

    Computational fluid dynamics (CFD) simulations of a radio-frequency (13.56 MHz) electro-thermal capacitively coupled plasma (CCP) micro-thruster have been performed using the commercial CFD-ACE+ package. Standard operating conditions of a 10 W, 1.5 Torr argon discharge were used to compare with previously obtained experimental results for validation. Results show that the driving force behind plasma production within the thruster is ion-induced secondary electrons ejected from the surface of the discharge tube, accelerated through the sheath to electron temperatures up to 33.5 eV. The secondary electron coefficient was varied to determine the effect on the discharge, with results showing that full breakdown of the discharge did not occur for coefficients coefficients less than or equal to 0.01.

  17. Stability of an elliptical vortex in a strongly coupled dusty plasma

    SciTech Connect

    Jana, Sayanee; Banerjee, Debabrata; Chakrabarti, Nikhil

    2015-08-15

    The stability of a long scale equilibrium vortex structure to short scale perturbations is studied in a strongly coupled dusty plasma in the framework of a generalized hydrodynamic model. It is shown that the free energy associated with the velocity shear of the vortex can drive secondary instabilities consisting of transverse shear waves when the resonance condition between the vortex rotation frequency and the secondary wave frequency is met. Such a process can transfer energy from the long scale vortex to the short scale secondary wave and thereby provide a saturation mechanism for long scale vortices in plasmas in a manner analogous to that in neutral fluids.

  18. Viscosity calculated in simulations of strongly coupled dusty plasmas with gas friction

    SciTech Connect

    Feng Yan; Goree, J.; Liu Bin

    2011-05-15

    A two-dimensional strongly coupled dusty plasma is modeled using Langevin and frictionless molecular dynamical simulations. The static viscosity {eta} and the wave-number-dependent viscosity {eta}(k) are calculated from the microscopic shear in the random motion of particles. A recently developed method of calculating the wave-number-dependent viscosity {eta}(k) is validated by comparing the results of {eta}(k) from the two simulations. It is also verified that the Green-Kubo relation can still yield an accurate measure of the static viscosity {eta} in the presence of a modest level of friction as in dusty plasma experiments.

  19. Stability of an elliptical vortex in a strongly coupled dusty plasma

    NASA Astrophysics Data System (ADS)

    Jana, Sayanee; Banerjee, Debabrata; Chakrabarti, Nikhil

    2015-08-01

    The stability of a long scale equilibrium vortex structure to short scale perturbations is studied in a strongly coupled dusty plasma in the framework of a generalized hydrodynamic model. It is shown that the free energy associated with the velocity shear of the vortex can drive secondary instabilities consisting of transverse shear waves when the resonance condition between the vortex rotation frequency and the secondary wave frequency is met. Such a process can transfer energy from the long scale vortex to the short scale secondary wave and thereby provide a saturation mechanism for long scale vortices in plasmas in a manner analogous to that in neutral fluids.

  20. Partons and Jets in a Strongly-Coupled Plasma from AdS/CFT

    NASA Astrophysics Data System (ADS)

    Iancu, E.

    2008-12-01

    We give a pedagogical review of recent progress towards understanding the response of a strongly coupled plasma at finite temperature to a hard probe. The plasma is that of the N=4 supersymmetric Yang-Mills theory and the hard probe is a virtual photon, or, more precisely, an R-current. Via the gauge/gravity duality, the problem of the current interacting with the plasma is mapped onto the gravitational interaction between a Maxwell field and a black hole embedded in the AdS5×S5 geometry. The physical interpretation of the AdS/CFT results can be then reconstructed with the help of the ultraviolet/infrared correspondence. We thus deduce that, for sufficiently high energy, the photon (or any other hard probe: a quark, a gluon, or a meson) disappears into the plasma via a universal mechanism, which is medium-induced quasi-democratic parton branching: the current develops a parton cascade such that, at any step in the branching process, the energy is almost equally divided among the daughter partons. The branching rate is controlled by the plasma which acts on the coloured partons with a constant force sim T2. When reinterpreted in the plasma infinite momentum frame, the same AdS/CFT results suggest a parton picture for the plasma structure functions, in which all the partons have fallen at very small values of Bjorken's x. For a time-like current in the vacuum, quasi-democratic branching implies that there should be no jets in electron-positron annihilation at strong coupling, but only a spatially isotropic distribution of hadronic matter.

  1. Arc-Cathode Coupling in the Modeling of a Conventional DC Plasma Spray Torch

    NASA Astrophysics Data System (ADS)

    Alaya, M.; Chazelas, C.; Mariaux, G.; Vardelle, A.

    2015-01-01

    The plasma torch is the basis of the plasma spray process and understanding of the electric arc dynamics within the plasma torch is necessary for better control of torch and process instabilities. Numerical simulation is a useful tool for investigating the effect of the torch geometry and operating parameters on the electric arc characteristics provided that the model of arc dynamics is reliable and the boundary conditions of the computational domain are well founded. However, such a model should also address the intricate transient and 3D interactions between the electrically conducting fluid and electromagnetic, thermal, and acoustics phenomena. Especially, the description of the electrode regions where the electric arc connects with solid material is an important part of a realistic model of the plasma torch operation as the properties of electric arcs at atmospheric pressure depend not only on the arc plasma medium, but also on the electrodes. This paper describes the 3D and time-dependent numerical simulation of a plasma arc and is focused on the cathode boundary conditions. This model was used to investigate the differences in arc characteristics when the cathode is included into the numerical domain and coupled with the arc. The magnetic and thermal coupling between the cathode and arc made it possible to get rid of the current density boundary condition at the cathode tip that is delicate to predetermine. It also allowed a better prediction of the cathode flow jet generated by the pumping action induced by the interaction of the self-magnetic field with the electric current and so it allowed a better description of the dynamics of arc. It should be a necessary step in the development of a fully predictive model of DC plasma torch operation.

  2. Online Coupling of Flow-Field Flow Fractionation and Single Particle Inductively Coupled Plasma-Mass Spectrometry: Characterization of Nanoparticle Surface Coating Thickness and Aggregation State

    EPA Science Inventory

    Surface coating thickness and aggregation state have strong influence on the environmental fate, transport, and toxicity of engineered nanomaterials. In this study, flow-field flow fractionation coupled on-line with single particle inductively coupled plasma-mass spectrometry i...

  3. The concept of coupling impedance in the self-consistent plasma wake field excitation

    NASA Astrophysics Data System (ADS)

    Fedele, R.; Akhter, T.; De Nicola, S.; Migliorati, M.; Marocchino, A.; Massimo, F.; Palumbo, L.

    2016-09-01

    Within the framework of the Vlasov-Maxwell system of equations, we describe the self-consistent interaction of a relativistic charged-particle beam with the surroundings while propagating through a plasma-based acceleration device. This is done in terms of the concept of coupling (longitudinal) impedance in full analogy with the conventional accelerators. It is shown that also here the coupling impedance is a very useful tool for the Nyquist-type stability analysis. Examples of specific physical situations are finally illustrated.

  4. Experimental Measurements and Density Functional Theory Calculations of Continuum Lowering in Strongly Coupled Plasmas

    NASA Astrophysics Data System (ADS)

    Vinko, Sam

    2014-10-01

    An accurate description of the ionization potential depression (IPD) of ions in plasmas due to their interaction with the environment is a fundamental problem in plasma physics, playing a key role in determining the ionization balance, charge state distribution, opacity and plasma equation of state. Here I present the first experimental investigation of the IPD as a function of ionic charge state in a range of dense Mg, Al and Si plasmas, using the Linac Coherent Light Source X-ray free-electron laser. The measurements show significantly larger IPDs than are predicted by the most commonly used models, such as that of Stewart-Pyatt, or the ion-sphere model of Zimmerman-More. Instead, plasma simulations using finite-temperature density functional theory with excited-state projector augmented-wave potentials show excellent agreement with the experimental results and explain the stronger-than-expected continuum lowering through the electronic structure of the valence states in these strong-coupling conditions, which retain much of their atomic characteristics close to the ion core regions. These results have a profound impact on the understanding and modelling of plasmas over a wide range of warm- and hot-dense matter conditions.

  5. On anomalous temporal evolution of gas pressure in inductively coupled plasma

    SciTech Connect

    Seo, B. H.; Chang, H. Y.; You, S. J.; Kim, J. H.; Seong, D. J.

    2013-04-01

    The temporal measurement of gas pressure in inductive coupled plasma revealed that there is an interesting anomalous evolution of gas pressure in the early stage of plasma ignition and extinction: a sudden gas pressure change and its relaxation of which time scales are about a few seconds and a few tens of second, respectively, were observed after plasma ignition and extinction. This phenomenon can be understood as a combined result between the neutral heating effect induced by plasma and the pressure relaxation effect for new gas temperature. The temporal measurement of gas temperature by laser Rayleigh scattering and the time dependant calculations for the neutral heating and pressure relaxation are in good agreement with our experimental results. This result and physics behind are expected to provide a new operational perspective of the recent plasma processes of which time is very short, such as a plasma enhanced atomic layer deposition/etching, a soft etch for disposal of residual by-products on wafer, and light oxidation process in semiconductor manufacturing.

  6. Transport and trapping of dust particles in a potential well created by inductively coupled diffused plasmas.

    PubMed

    Choudhary, Mangilal; Mukherjee, S; Bandyopadhyay, P

    2016-05-01

    A versatile linear dusty (complex) plasma device is designed to study the transport and dynamical behavior of dust particles in a large volume. Diffused inductively coupled plasma is generated in the background of argon gas. A novel technique is used to introduce the dust particles in the main plasma by striking a secondary direct current glow discharge. These dust particles are found to get trapped in an electrostatic potential well, which is formed due to the combination of the ambipolar electric field caused by diffusive plasma and the field produced by the charged glass wall of the vacuum chamber. According to the requirements, the volume of the dust cloud can be controlled very precisely by tuning the plasma and discharge parameters. The present device can be used to address the underlying physics behind the transport of dust particles, self-excited dust acoustic waves, and instabilities. The detailed design of this device, plasma production and characterization, trapping and transport of the dust particle, and some of the preliminary experimental results are presented. PMID:27250421

  7. Transport and trapping of dust particles in a potential well created by inductively coupled diffused plasmas

    NASA Astrophysics Data System (ADS)

    Choudhary, Mangilal; Mukherjee, S.; Bandyopadhyay, P.

    2016-05-01

    A versatile linear dusty (complex) plasma device is designed to study the transport and dynamical behavior of dust particles in a large volume. Diffused inductively coupled plasma is generated in the background of argon gas. A novel technique is used to introduce the dust particles in the main plasma by striking a secondary direct current glow discharge. These dust particles are found to get trapped in an electrostatic potential well, which is formed due to the combination of the ambipolar electric field caused by diffusive plasma and the field produced by the charged glass wall of the vacuum chamber. According to the requirements, the volume of the dust cloud can be controlled very precisely by tuning the plasma and discharge parameters. The present device can be used to address the underlying physics behind the transport of dust particles, self-excited dust acoustic waves, and instabilities. The detailed design of this device, plasma production and characterization, trapping and transport of the dust particle, and some of the preliminary experimental results are presented.

  8. Spectra of heliumlike carbon, aluminium and argon under strongly coupled plasma

    NASA Astrophysics Data System (ADS)

    Sil, A. N.; Anton, J.; Fritzsche, S.; Mukherjee, P. K.; Fricke, B.

    2009-12-01

    Spectral line positions for the highly stripped helium like carbon, aluminium and argon embedded in intense plasma environments have been calculated theoretically to compare with the existing data available from laser plasma experiments. The changes in the ionization potentials for such ions have been determined and the excitation energies, oscillator strengths and transition probabilities for the transitions 1s2 1S → 1snp 1P (n=2-5) have been evaluated for the diagnostic determination of such plasmas. The ion sphere (IS) model was used for estimating the effect of strongly coupled plasma on the ions within the non-relativistic as well as the relativistic framework. Time dependent perturbation theory has been applied for obtaining the linear response properties of the ions in the non-relativistic approximation. The effects of the plasma environment on such properties of the ions under the Debye screening model with suitable cut off radii have also been considered for comparing the data with those obtained from the IS model of the plasma.

  9. Nonlinear magnetosonic solitary and shock waves in strongly coupled quantum electron-positron-ion plasmas

    NASA Astrophysics Data System (ADS)

    Wang, Xiaodan; Wang, Yunliang; Liu, Tielu; Zhang, Fan

    2016-06-01

    > Two-dimensional nonlinear magnetosonic solitary and shock waves propagating perpendicular to the applied magnetic field are presented in quantum electron-positron-ion plasmas with strongly coupled classical ions and weakly coupled quantum electrons and positrons. The generalized viscoelastic hydrodynamic model is used for the ions and a quantum hydrodynamic model is introduced for the electrons and positrons. In the weakly nonlinear limit, a modified Kadomstev-Petviashvili (KP) equation with a damping term and a KP-Burgers equation have been derived in the kinetic regime and hydrodynamic regime, respectively. The analytical and numerical solutions of the modified KP and KP-Burgers equations are also presented and analysed with the typical parameters of a white dwarf star and pulsar magnetosphere, which show that the quantum plasma beta and the variation of positron number density have remarkable effects on the propagation of magnetosonic solitary and shock waves.

  10. Equilibration Rates in a Strongly Coupled Nonconformal Quark-Gluon Plasma.

    PubMed

    Buchel, Alex; Heller, Michal P; Myers, Robert C

    2015-06-26

    We initiate the study of equilibration rates of strongly coupled quark-gluon plasmas in the absence of conformal symmetry. We primarily consider a supersymmetric mass deformation within N=2^{*} gauge theory and use holography to compute quasinormal modes of a variety of scalar operators, as well as the energy-momentum tensor. In each case, the lowest quasinormal frequency, which provides an approximate upper bound on the thermalization time, is proportional to temperature, up to a prefactor with only a mild temperature dependence. We find similar behavior in other holographic plasmas, where the model contains an additional scale beyond the temperature. Hence, our study suggests that the thermalization time is generically set by the temperature, irrespective of any other scales, in strongly coupled gauge theories. PMID:26197117

  11. Inductively coupled plasma mass spectrometry for stable isotope metabolic tracer studies of living systems

    SciTech Connect

    Luong, E.

    1999-05-10

    This dissertation focuses on the development of methods for stable isotope metabolic tracer studies in living systems using inductively coupled plasma single and dual quadrupole mass spectrometers. Sub-nanogram per gram levels of molybdenum (Mo) from human blood plasma are isolated by the use of anion exchange alumina microcolumns. Million-fold more concentrated spectral and matrix interferences such as sodium, chloride, sulfate, phosphate, etc. in the blood constituents are removed from the analyte. The recovery of Mo from the alumina column is 82 {+-} 5% (n = 5). Isotope dilution inductively coupled plasma mass spectrometry (ID-ICP-MS) is utilized for the quantitative ultra-trace concentration determination of Mo in bovine and human blood samples. The average Mo concentration in reference bovine serum determined by this method is 10.2 {+-} 0.4 ng/g, while the certified value is 11.5 {+-} 1.1 ng/g (95% confidence interval). The Mo concentration of one pool of human blood plasma from two healthy male donors is 0.5 {+-} 0.1 ng/g. The inductively coupled plasma twin quadrupole mass spectrometer (ICP-TQMS) is used to measure the carbon isotope ratio from non-volatile organic compounds and bio-organic molecules to assess the ability as an alternative analytical method to gas chromatography combustion isotope ratio mass spectrometry (GC-combustion-IRMS). Trytophan, myoglobin, and {beta}-cyclodextrin are chosen for the study, initial observation of spectral interference of {sup 13}C{sup +} with {sup 12}C{sup 1}H{sup +} comes from the incomplete dissociation of myoglobin and/or {beta}-cyclodextrin.

  12. Boron determination in steels by Inductively-Coupled Plasma spectometry (ICP)

    NASA Technical Reports Server (NTRS)

    Coedo, A. G.; Lopez, M. T. D.

    1986-01-01

    The sample is treated with 5N H2SO4 followed by concentrated HNO3 and the diluted mixture is filtered. Soluble B is determined in the filtrate by Inductively-Coupled Plasma (ICP) spectrometry after addition HCl and extraction of Fe with ethyl-ether. The residue is fused with Na2CO3 and, after treatment with HCl, the insoluble B is determined by ICP spectrometry as before. The method permits determination of ppm amounts of B in steel.

  13. Iron-Isotopic Fractionation Studies Using Multiple Collector Inductively Coupled Plasma Mass Spectrometry

    NASA Technical Reports Server (NTRS)

    Anbar, A. D.; Zhang, C.; Barling, J.; Roe, J. E.; Nealson, K. H.

    1999-01-01

    The importance of Fe biogeochemistry has stimulated interest in Fe isotope fractionation. Recent studies using thermal ionization mass spectrometry (TIMS) and a "double spike" demonstrate the existence of biogenic Fe isotope effects. Here, we assess the utility of multiple-collector inductively-coupled plasma mass spectrometry(MC-ICP-MS) with a desolvating sample introduction system for Fe isotope studies, and present data on Fe biominerals produced by a thermophilic bacterium. Additional information is contained in the original extended abstract.

  14. Numerical methods for TVD transport and coupled relaxing processes in gases and plasmas

    NASA Technical Reports Server (NTRS)

    Cambier, Jean-Luc

    1990-01-01

    The construction of second-order upwind schemes for nonequilibrium plasmas, for both one- and two-fluid formulations is demonstrated. Coupled relaxation processes, including ionization kinetics and radiative processes and their algorithms for nonequilibrium, multiple temperature conditions are described as well. The paper applies the numerical techniques on some simple test cases, points out critical problems and their solutions, and makes qualitative comparisons with known results, whenever possible.

  15. Reduction of plyatomic ion interferences in indictively coupled plasma mass spectrometry with cryogenic desolvation

    SciTech Connect

    Alves, L.C.

    1993-09-01

    A desolvation scheme for introducing aqueous and organic samples into an argon inductively coupled plasma is described; the aerosol generated by nebulizer is heated (+140 C) and cooled ({minus}80 C) repeatedly, and the dried aerosol is then injected into the mass spectrometer. Polyatomic ions are greatly suppressed. This scheme was validated with analysis of seawater and urine reference samples. Finally, the removal of organic solvents by cryogenic desolvation was studied.

  16. In situ calibration of inductively coupled plasma-atomic emission and mass spectroscopy

    DOEpatents

    Braymen, S.D.

    1996-06-11

    A method and apparatus are disclosed for in situ addition calibration of an inductively coupled plasma atomic emission spectrometer or mass spectrometer using a precision gas metering valve to introduce a volatile calibration gas of an element of interest directly into an aerosol particle stream. The present in situ calibration technique is suitable for various remote, on-site sampling systems such as laser ablation or nebulization. 5 figs.

  17. 2D PIC/MC simulations of electrical asymmetry effect in capacitive coupled plasma

    NASA Astrophysics Data System (ADS)

    Zhang, Quan-Zhi; Jiang, Wei; Wang, You-Nian

    2011-10-01

    Recently a so-called electrical asymmetry effect (EAE), which could achieve high-degree separate control of ion flux and energy in dual-frequency capacitively coupled plasmas, was discovered theoretically by Heil et al. and was confirmed by experiments and theory/numerical simulations later on. However, since there always is a bigger grounded surface area for experiment devices, which reduces the geometrical symmetry, and all the simulations were limited to 1D before, it is, thus, worth studying the EAE when coupling the electrically and geometrically asymmetric discharges theoretically. Here, we perform 2D PIC/MC simulations, which can include both electrically and geometrically asymmetric factors. The EAE on plasma parameters, such as dc self-bias voltage, density profiles, ion energy distribution and power absorption of electron have been examined for different pressures and geometry conditions. Recently a so-called electrical asymmetry effect (EAE), which could achieve high-degree separate control of ion flux and energy in dual-frequency capacitively coupled plasmas, was discovered theoretically by Heil et al. and was confirmed by experiments and theory/numerical simulations later on. However, since there always is a bigger grounded surface area for experiment devices, which reduces the geometrical symmetry, and all the simulations were limited to 1D before, it is, thus, worth studying the EAE when coupling the electrically and geometrically asymmetric discharges theoretically. Here, we perform 2D PIC/MC simulations, which can include both electrically and geometrically asymmetric factors. The EAE on plasma parameters, such as dc self-bias voltage, density profiles, ion energy distribution and power absorption of electron have been examined for different pressures and geometry conditions. This work was supported by the National Natural Science Foundation of China (Grant No 10635010) and the Important National Science & Technology Specific Project (Grant No

  18. Non-linear Frequency Shifts, Mode Couplings, and Decay Instability of Plasma Waves

    NASA Astrophysics Data System (ADS)

    Affolter, Mathew; Anderegg, F.; Driscoll, C. F.; Valentini, F.

    2015-11-01

    We present experiments and theory for non-linear plasma wave decay to longer wavelengths, in both the oscillatory coupling and exponential decay regimes. The experiments are conducted on non-neutral plasmas in cylindrical Penning-Malmberg traps, θ-symmetric standing plasma waves have near acoustic dispersion ω (kz) ~kz - αkz2 , discretized by kz =mz (π /Lp) . Large amplitude waves exhibit non-linear frequency shifts δf / f ~A2 and Fourier harmonic content, both of which are increased as the plasma dispersion is reduced. Non-linear coupling rates are measured between large amplitude mz = 2 waves and small amplitude mz = 1 waves, which have a small detuning Δω = 2ω1 -ω2 . At small excitation amplitudes, this detuning causes the mz = 1 mode amplitude to ``bounce'' at rate Δω , with amplitude excursions ΔA1 ~ δn2 /n0 consistent with cold fluid theory and Vlasov simulations. At larger excitation amplitudes, where the non-linear coupling exceeds the dispersion, phase-locked exponential growth of the mz = 1 mode is observed, in qualitative agreement with simple 3-wave instability theory. However, significant variations are observed experimentally, and N-wave theory gives stunningly divergent predictions that depend sensitively on the dispersion-moderated harmonic content. Measurements on higher temperature Langmuir waves and the unusual ``EAW'' (KEEN) waves are being conducted to investigate the effects of wave-particle kinetics on the non-linear coupling rates. Department of Energy Grants DE-SC0002451and DE-SC0008693.

  19. Simple thermodynamics of strongly coupled one-component-plasma in two and three dimensions

    SciTech Connect

    Khrapak, Sergey A.; Khrapak, Alexey G.

    2014-10-15

    Simple analytical approximations for the internal energy of the strongly coupled one-component-plasma in two and three dimensions are discussed. As a result, new practical expressions for the internal energy in the fluid phase are proposed. Their accuracy is checked by evaluating the location of the fluid-solid phase transition from the free energy consideration. Possible applications to other related systems are briefly discussed.

  20. Magnetosphere--Ionosphere Coupling: Effects of Plasma Alfven Wave Relative Motion

    NASA Astrophysics Data System (ADS)

    Christiansen, P. J.; Dum, C. T.

    1989-06-01

    The introduction of relative perpendicular motion between a flux-tube supporting shear Alfven wave activity and the background plasma is studied in the context of the coupling of a wave generating region with a distant ionosphere. The results of a representative simulation, using an extended version of the code developed by Lysak & Dum (J. geophys. Res. 88, 365 (1983)), are used as a basis for interpreting some aspects of recent satellite observations.

  1. Magnetosphere-ionosphere coupling: effects of plasma Alfvén wave relative motion.

    NASA Astrophysics Data System (ADS)

    Christiansen, P. J.; Dum, C. T.

    The introduction of relative perpendicular motion between a flux-tube supporting shear Alfvén wave activity and the background plasma is studied in the context of the coupling of a wave generating region with a distant ionosphere. The results of a representative simulation, using an extended version of the code developed by Lysak & Dum, are used as a basis for interpreting some aspects of recent satellite observations.

  2. Effect of antenna size on electron kinetics in inductively coupled plasmas

    SciTech Connect

    Lee, Hyo-Chang; Chung, Chin-Wook

    2013-10-15

    Spatially resolved measurements of electron energy distribution functions (EEDFs) are investigated in inductively coupled plasmas with two planar antenna coils. When the plasma is sustained by the antenna with a diameter of 18 cm, the nonlocal kinetics is preserved in the argon gas pressure range from 2 mTorr to 20 mTorr. However, electron kinetics transit from nonlocal kinetics to local kinetics in discharge sustained by the antenna coil with diameter 34 cm. The results suggest that antenna size as well as chamber length are important parameters for the transition of the electron kinetics. Spatial variations of plasma potential, effective electron temperature, and EEDF in terms of total electron energy scale are also presented.

  3. Direct current dielectric barrier assistant discharge to get homogeneous plasma in capacitive coupled discharge

    SciTech Connect

    Du, Yinchang; Li, Yangfang; Cao, Jinxiang; Liu, Yu; Wang, Jian; Zheng, Zhe

    2014-06-15

    In this paper, we propose a method to get more homogeneous plasma in the geometrically asymmetric capacitive coupled plasma (CCP) discharge. The dielectric barrier discharge (DBD) is used for the auxiliary discharge system to improve the homogeneity of the geometrically asymmetric CCP discharge. The single Langmuir probe measurement shows that the DBD can increase the electron density in the low density volume, where the DBD electrodes are mounted, when the pressure is higher than 5 Pa. By this manner, we are able to improve the homogeneity of the plasma production and increase the overall density in the target volume. At last, the finite element simulation results show that the DC bias, applied to the DBD electrodes, can increase the homogeneity of the electron density in the CCP discharge. The simulation results show a good agreement with the experiment results.

  4. Measurement of neutral gas temperature in a 13.56 MHz inductively coupled plasma

    SciTech Connect

    Jayapalan, Kanesh K.; Chin, Oi Hoong

    2015-04-24

    Measuring the temperature of neutrals in inductively coupled plasmas (ICP) is important as heating of neutral particles will influence plasma characteristics such as the spatial distributions of plasma density and electron temperature. Neutral gas temperatures were deduced using a non-invasive technique that combines gas actinometry, optical emission spectroscopy and simulation which is described here. Argon gas temperature in a 13.56 MHz ICP were found to fall within the range of 500 − 800 K for input power of 140 − 200 W and pressure of 0.05 − 0.2 mbar. Comparing spectrometers with 0.2 nm and 0.5 nm resolution, improved fitting sensitivity was observed for the 0.2 nm resolution.

  5. Synthesis of Ozone at Atmospheric Pressure by a Quenched Induction-Coupled Plasma Torch

    SciTech Connect

    A. Blutke; B.C. Stratton; D.R. Mikkelsen; J. Vavruska; R. Knight

    1998-01-01

    The technical feasibility of using an induction-coupled plasma (ICP) torch to synthesize ozone at atmospheric pressure is explored. Ozone concentrations up to ~250 ppm were produced using a thermal plasma reactor system based on an ICP torch operating at 2.5 MHz and ~11 kVA with an argon/oxygen mixture as the plasma-forming gas. A gaseous oxygen quench formed ozone by rapid mixing of molecular oxygen with atomic oxygen produced by the torch. The ozone concentration in the reaction chamber was measured by Fourier Transform infrared (FTIR) spectroscopy over a wide range of experimental configurations. The geometry of the quench gas flow, the quench flow velocity, and the quench flow rate played important roles in determining the ozone concentration. The ozone concentration was sensitive to the torch RF power, but was insensitive to the torch gas flow rates. These observations are interpreted within the framework of a simple model of ozone synthesis.

  6. Control of plasma density profile via wireless power transfer in an inductively coupled discharge

    NASA Astrophysics Data System (ADS)

    Lee, Hee-Jin; Bang, Jin-Young; Lee, Hyo-Chang; Kim, Young-Cheol; Chung, Chin-Wook

    2012-10-01

    Wireless power transfer via a strongly coupled magnetic resonance was applied to the field of plasma. Two antennas (an inner antenna coil was connected to the RF power and an outer antenna was a resonant antenna with a variable capacitor) were placed on the top of a chamber. The resonant antenna is electrically separated from the inner antenna coil. As the self-resonance frequency of the resonant antenna was adjusted, the power transfer ratio of the inner antenna to the outer antenna was changed and a dramatic evolution of the plasma density profile was measured. The density profiles were changed from a concave shape to a convex shape by varying the self-resonance frequency of the outer antenna. This result shows that the plasma density spatial distribution can be successfully controlled via wireless power transfer.

  7. A volume averaged global model for inductively coupled HBr/Ar plasma discharge

    NASA Astrophysics Data System (ADS)

    Chung, Sang-Young; Kwon, Deuk-Chul; Choi, Heechol; Song, Mi-Young

    2015-09-01

    A global model for inductively coupled HBr/Ar plasma was developed. The model was based on a self-consistent global model had been developed by Kwon et al., and a set of chemical reactions in the HBr/Ar plasma was compiled by surveying theoretical, experimental and evaluative researches. In this model vibrational excitations of bi-atomic molecules and electronic excitations of hydrogen atom were taken into account. Neutralizations by collisions between positive and negative ions were considered with Hakman's approximate formula achieved by fitting of theoretical result. For some reactions that were not supplied from literatures the reaction parameters of Cl2 and HCl were adopted as them Br2 and HBr, respectively. For validation calculation results using this model were compared with experimental results from literatures for various plasma discharge parameters and it showed overall good agreement.

  8. The Integrated Plasma Simulator: A Flexible Python Framework for Coupled Multiphysics Simulation

    SciTech Connect

    Foley, Samantha S; Elwasif, Wael R; Bernholdt, David E

    2011-11-01

    High-fidelity coupled multiphysics simulations are an increasingly important aspect of computational science. In many domains, however, there has been very limited experience with simulations of this sort, therefore research in coupled multiphysics often requires computational frameworks with significant flexibility to respond to the changing directions of the physics and mathematics. This paper presents the Integrated Plasma Simulator (IPS), a framework designed for loosely coupled simulations of fusion plasmas. The IPS provides users with a simple component architecture into which a wide range of existing plasma physics codes can be inserted as components. Simulations can take advantage of multiple levels of parallelism supported in the IPS, and can be controlled by a high-level ``driver'' component, or by other coordination mechanisms, such as an asynchronous event service. We describe the requirements and design of the framework, and how they were implemented in the Python language. We also illustrate the flexibility of the framework by providing examples of different types of simulations that utilize various features of the IPS.

  9. Disparate-scale coupling of turbulence in QH-mode plasmas on DIII-D

    NASA Astrophysics Data System (ADS)

    Muscatello, C. M.; Burrell, K. H.; Chen, Xi; Luhmann, N. C., Jr.; Grierson, B. A.; Kramer, G. J.; Tobias, B. J.

    2015-11-01

    Analysis of incoherent fluctuations in quiescent H-mode (QH-mode) plasmas suggests nonlinear coupling between high- and low-frequency turbulence. In QH-mode plasmas with edge harmonic oscillations (EHO), transport levels are enhanced when incoherent fluctuations are present compared to QH-mode plasmas with only EHO. Furthermore, in some cases without EHO, the incoherent fluctuations alone can sustain QH-mode. Bispectral analysis of microwave imaging reflectometer (MIR) data indicates nonlinear 3-wave coupling among disparate spatial scales of the turbulence. The bicoherence is above noise levels for high-frequency (300 < f < 500 kHz), intermediate-scale (kθ ~ 0.2 - 0.6 cm -1) and low-frequency (f < 50 kHz), large-scale (kθ < 0.2 cm -1) turbulence. Cross-phase analysis reveals that the high-frequency turbulence rotates in the electron diamagnetic drift direction, while the low-frequency turbulence rotates in the ion diamagnetic drift direction, suggesting coupling between different instabilities. Work supported by the US DOE under DE-FC02-04ER54698, DE-FG02-99ER54531 and DE-AC02-09CH11466.

  10. A simple, low-cost, versatile charge-coupled device spectrometer for plasma spectroscopy

    SciTech Connect

    Den Hartog, D.J.; Holly, D.J.

    1997-01-01

    We have constructed a simple, low-cost charge-coupled device (CCD) spectrometer capable of both high resolution ({Delta}{lambda}{le}0.015 nm) and large bandpass (110 nm with {Delta}{lambda}{approximately}0.3 nm). These two modes of operation provide two broad areas of capability for plasma spectroscopy. The first major application is measurement of emission line broadening; the second is emission line surveys from the ultraviolet to the near infrared. Measurements have been made on a low-temperature plasma produced by a miniature electrostatic plasma source and the high-temperature plasma in the Madison Symmetric Torus reversed-field pinch. The spectrometer is a modified Jarrell{endash}Ash 0.5 m Ebert{endash}Fastie monochromator. Light is coupled into the entrance slit with a fused silica fiber optic bundle. The exposure time (2 ms minimum) is controlled by a fast electro-mechanical shutter. The exit plane detector is a compact and robust CCD detector developed for amateur astronomy by Santa Barbara Instrument Group. The CCD detector is controlled and read out by a Macintosh{reg_sign} computer. This spectrometer is sophisticated enough to serve well in a research laboratory, yet is simple and inexpensive enough to be affordable for instructional use. {copyright} {ital 1997 American Institute of Physics.}

  11. Excited-state positronium formation in positron–hydrogen collisions under weakly coupled plasmas

    NASA Astrophysics Data System (ADS)

    Rej, Pramit; Ghoshal, Arijit

    2016-06-01

    The effect of screening of weakly coupled plasma on positronium (Ps) formation in excited states in the scattering of a positron from the ground state of a hydrogen atom has been investigated using a distorted wave theory which includes screened dipole polarization potential. The effect of external plasma has been incorporated by using the Debye–Hückel screening model of the interacting charge particles. Variationally determined simple hydrogenic wave functions have been used to obtain the distorted wave scattering amplitude in a closed form. Effects of plasma screening on the differential and total cross sections have been studied in detail in the energy range 20–300 eV of incident positron. For the free atomic case, our results agree nicely with some of the most accurate results available in the literature. To the best of our knowledge, such a study on the differential and total cross sections for Ps formation in highly excited states in positron–hydrogen collisions under weakly coupled plasma is reported first time in the literature.

  12. Resonant RF network antennas for large-area and large-volume inductively coupled plasma sources

    NASA Astrophysics Data System (ADS)

    Hollenstein, Ch; Guittienne, Ph; Howling, A. A.

    2013-10-01

    Large-area and large-volume radio frequency (RF) plasmas are produced by different arrangements of an elementary electrical mesh consisting of two conductors interconnected by a capacitor at each end. The obtained cylindrical and planar RF networks are resonant and generate very high RF currents. The input impedance of such RF networks shows the behaviour of an RLC parallel resonance equivalent circuit. The real impedance at the resonance frequency is of great advantage for power matching compared with conventional inductive devices. Changes in the RLC equivalent circuit during the observed E-H transition will allow future interpretation of the plasma-antenna coupling. Furthermore, high power transfer efficiencies are found during inductively coupled plasma (ICP) operation. For the planar RF antenna network it is shown that the E-H transition occurs simultaneously over the entire antenna. The underlying physics of these discharges induced by the resonant RF network antenna is found to be identical to that of the conventional ICP devices described in the literature. The resonant RF network antenna is a new versatile plasma source, which can be adapted to applications in industry and research.

  13. Ultrafast coupling of coherent phonons with a nonequilibrium electron-hole plasma in GaAs

    NASA Astrophysics Data System (ADS)

    Basak, Amlan Kumar; Petek, Hrvoje; Ishioka, Kunie; Thatcher, Evan M.; Stanton, Christopher J.

    2015-03-01

    We present a joint experimental theoretical study of the coupling of coherent phonons in bulk GaAs with a nonequilibrium electron-hole plasma following photoexcitation at the E1 gap by ultrafast laser pulses. In contrast to prior coherent phonon experiments where photoexcitation across the E0 gap generated electrons in the Γ valley, for the E1 gap excitation, the majority of the electrons are generated in the satellite L valleys. This leads to a drastically different situation from the previous studies because the damping of electrons is now faster due to the higher scattering rates in the L valley, and, in addition, the diffusion of carriers has a significant effect on the plasma response due to the shorter optical absorption depth of the pump-probe light. Reflectivity measurements show coherent phonon-plasmon oscillations, whose frequencies lie between the transverse and longitudinal optical phonon frequencies due to the heavy damping and change with time due to the diffusion of the plasma. We analyze the experimental data with a theoretical model that describes the time and density-dependent coupling of the coherent phonon and the electron-hole plasma as the photoexcited carriers diffuse into the sample on a subpicosecond time scale. The calculated phonon-plasmon dynamics qualitatively reproduce the experimentally observed time-dependent frequency.

  14. Positron impact excitations of hydrogen atom embedded in weakly coupled plasmas: Formation of Rydberg atoms

    SciTech Connect

    Rej, Pramit; Ghoshal, Arijit

    2014-09-15

    Formation of Rydberg atoms due to 1s→nlm excitations of hydrogen, for arbitrary n, l, m, by positron impact in weakly coupled plasma has been investigated using a distorted-wave theory in the momentum space. The interactions among the charged particles in the plasma have been represented by Debye-Huckel potentials. Making use of a simple variationally determined wave function for the hydrogen atom, it has been possible to obtain the distorted-wave scattering amplitude in a closed analytical form. A detailed study has been made on the effects of plasma screening on the differential and total cross sections in the energy range 20–300 eV of incident positron. For the unscreened case, our results agree nicely with some of the most accurate results available in the literature. To the best of our knowledge, such a study on the differential and total cross sections for 1s→nlm inelastic positron-hydrogen collisions for arbitrary n, l, m in weakly coupled plasmas is the first reported in the literature.

  15. Chaoticity threshold in magnetized plasmas: Numerical results in the weak coupling regime

    SciTech Connect

    Carati, A. Benfenati, F.; Maiocchi, A.; Galgani, L.; Zuin, M.

    2014-03-15

    The present paper is a numerical counterpart to the theoretical work [Carati et al., Chaos 22, 033124 (2012)]. We are concerned with the transition from order to chaos in a one-component plasma (a system of point electrons with mutual Coulomb interactions, in a uniform neutralizing background), the plasma being immersed in a uniform stationary magnetic field. In the paper [Carati et al., Chaos 22, 033124 (2012)], it was predicted that a transition should take place when the electron density is increased or the field decreased in such a way that the ratio ω{sub p}/ω{sub c} between plasma and cyclotron frequencies becomes of order 1, irrespective of the value of the so-called Coulomb coupling parameter Γ. Here, we perform numerical computations for a first principles model of N point electrons in a periodic box, with mutual Coulomb interactions, using as a probe for chaoticity the time-autocorrelation function of magnetization. We consider two values of Γ (0.04 and 0.016) in the weak coupling regime Γ ≪ 1, with N up to 512. A transition is found to occur for ω{sub p}/ω{sub c} in the range between 0.25 and 2, in fairly good agreement with the theoretical prediction. These results might be of interest for the problem of the breakdown of plasma confinement in fusion machines.

  16. Evaluation of the influence of the main plasma density parameters on antenna coupling and radio frequency potentials with TOPICA code

    NASA Astrophysics Data System (ADS)

    Milanesio, D.; Maggiora, R.

    2013-04-01

    The successful design of an ion cyclotron antenna mainly relies on the capability of accurately predicting its behavior both in terms of input parameters, and therefore power coupled to plasma, and radiated fields. All these features essentially depend on the antenna itself (its geometry, the matching and tuning systems) and, obviously, on the faced loading. In this paper a number of plasma profiles is analysed with the help of the TOPICA code, a predictive tool for the design and optimization of radio frequency (RF) launchers in front of a plasma, in order to understand which plasma parameters have the most significant influence on the coupling performances of a typical IC antenna.

  17. Coupling Of The JET ICRF Antennas In ELMy H-mode Plasmas With ITER Relevant Plasma-Straps Distance

    SciTech Connect

    Mayoral, M.-L.; Monakhov, I.; Jacquet, P.; Brix, M.; Graham, M.; Erents, K.; Korotkov, A.; Lomas, P.; Mailloux, J.; McDonald, D. C.; Stamp, M.; Walden, A.; Hobirk, J.; Ongena, J.

    2007-09-28

    In ITER, the requirement for the ICRF antenna is to deliver 20 MW in ELMy H-mode plasmas with an averaged antenna - plasma separatrix distance of 14 cm. Two major problems will have to be solved: the very fast change in antenna loading during ELMs and the decrease of the loading when the plasma is pushed far away from the antenna. JET has the capability to combine these conditions and for the first time, experiments were performed in ELMy H-mode at antenna--separatrix distance, referred as ROG, varied from 10 to 14 cm. When ROG was increased, the perturbation caused by ELMs was found to decrease significantly and the loading between ELMs was found to deteriorate to very low values. In order to compensate the latter unwanted effect, different levels of deuterium gas were injected in the edge either from the divertor, the midplane or the top of the tokamak. Using this technique, the loading was increased by up to a factor 6 and up to 8 MW of ICRF power were coupled.

  18. Inductively Coupled Plasma and Electron Cyclotron Resonance Plasma Etching of InGaAlP Compound Semiconductor System

    SciTech Connect

    Abernathy, C.R.; Hobson, W.S.; Hong, J.; Lambers, E.S.; Pearton, S.J.; Shul, R.J.

    1998-11-04

    Current and future generations of sophisticated compound semiconductor devices require the ability for submicron scale patterning. The situation is being complicated since some of the new devices are based on a wider diversity of materials to be etched. Conventional IUE (Reactive Ion Etching) has been prevalent across the industry so far, but has limitations for materials with high bond strengths or multiple elements. IrI this paper, we suggest high density plasmas such as ECR (Electron Cyclotron Resonance) and ICP (Inductively Coupled Plasma), for the etching of ternary compound semiconductors (InGaP, AIInP, AlGaP) which are employed for electronic devices like heterojunction bipolar transistors (HBTs) or high electron mobility transistors (HEMTs), and photonic devices such as light-emitting diodes (LEDs) and lasers. High density plasma sources, opeiating at lower pressure, are expected to meet target goals determined in terms of etch rate, surface morphology, surface stoichiometry, selectivity, etc. The etching mechanisms, which are described in this paper, can also be applied to other III-V (GaAs-based, InP-based) as well as III-Nitride since the InGaAIP system shares many of the same properties.

  19. Influence of surface conditions on plasma dynamics and electron heating in a radio-frequency driven capacitively coupled oxygen plasma

    NASA Astrophysics Data System (ADS)

    Greb, Arthur; Gibson, Andrew Robert; Niemi, Kari; O'Connell, Deborah; Gans, Timo

    2015-08-01

    The impact of changing surface condition on plasma dynamics and electron heating is investigated by means of numerical simulations, based on a semi-kinetic fluid model approach, and compared with measurements of the nanosecond electron dynamics in the plasma-surface interface region using phase resolved optical emission spectroscopy (PROES). The simulations are conducted in a one-dimensional domain and account for a geometrical asymmetry comparable to the experimental setup of a radio-frequency driven capacitively coupled plasma in a gaseous electronics conference reference cell. A simple reaction scheme is considered, including electrons, \\text{O}2+ positive ions, {{\\text{O}}-} negative ions and {{\\text{O}}2}{≤ft(1Δ\\right)} metastable singlet delta oxygen (SDO) as individual species. The role of surface loss and effective lifetime of SDO is discussed. To simulate different surface conditions, the SDO surface loss probability and the secondary electron emission coefficient were varied in the model. It is found that a change in surface condition significantly influences the metastable concentration, electronegativity, spatial particle distributions and densities as well as the ionization and electron heating dynamics. The excitation dynamics obtained from simulations are compared with PROES measurements. This allows to determine experimentally relevant SDO surface loss probabilities and secondary electron emission coefficient values in-situ and is demonstrated for two different surface materials, namely aluminum and Teflon.

  20. Theory of coupled whistler-electron temperature gradient mode in high beta plasma: Application to linear plasma device

    SciTech Connect

    Singh, S. K.; Awasthi, L. M.; Singh, R.; Kaw, P. K.; Jha, R.; Mattoo, S. K.

    2011-10-15

    This paper presents a theory of coupled whistler (W) and electron temperature gradient (ETG) mode using two-fluid model in high beta plasma. Non-adiabatic ion response, parallel magnetic field perturbation ({delta}B{sub z}), perpendicular magnetic flutter ({delta}B{sub perpendicular}), and electron collisions are included in the treatment of theory. A linear dispersion relation for whistler-electron temperature gradient (W-ETG) mode is derived. The numerical results obtained from this relation are compared with the experimental results observed in large volume plasma device (LVPD) [Awasthi et al., Phys. Plasma 17, 42109 (2010)]. The theory predicts that the instability grows only where the temperature gradient is finite and the density gradient flat. For the parameters of the experiment, theoretically estimated frequency and wave number of W-ETG mode match with the values corresponding to the peak in the power spectrum observed in LVPD. By using simple mixing length argument, estimated level of fluctuations of W-ETG mode is in the range of fluctuation level observed in LVPD.

  1. Storm time plasma transport in a unified and inter-coupled global magnetosphere model

    NASA Astrophysics Data System (ADS)

    Ilie, R.; Liemohn, M. W.; Toth, G.

    2014-12-01

    We present results from the two-way self-consistent coupling between the kinetic Hot Electron and Ion Drift Integrator (HEIDI) model and the Space Weather Modeling Framework (SWMF). HEIDI solves the time dependent, gyration and bounced averaged kinetic equation for the phase space density of different ring current species and computes full pitch angle distributions for all local times and radial distances. During geomagnetic times the dipole approximation becomes unsuitable even in the inner magnetosphere. Therefore the HEIDI model was generalized to accommodate an arbitrary magnetic field and through the coupling with SWMF it obtains a magnetic field description throughout the HEIDI domain along with a plasma distribution at the model outer boundary from the Block Adaptive Tree Solar Wind Roe Upwind Scheme (BATS-R-US) magnetohydrodynamics (MHD) model within SWMF. Electric field self-consistency is assured by the passing of convection potentials from the Ridley Ionosphere Model (RIM) within SWMF. In this study we test the various levels of coupling between the 3 physics based models, highlighting the role that the magnetic field, plasma sheet conditions and the cross polar cap potential play in the formation and evolution of the ring current. We show that the dynamically changing geospace environment itself plays a key role in determining the geoeffectiveness of the driver. The results of the self-consistent coupling between HEIDI, BATS-R-US and RIM during disturbed conditions emphasize the importance of a kinetic self-consistent approach to the description of geospace.

  2. Modeling of inductively coupled plasma SF{sub 6}/O{sub 2}/Ar plasma discharge: Effect of O{sub 2} on the plasma kinetic properties

    SciTech Connect

    Pateau, Amand; Rhallabi, Ahmed Fernandez, Marie-Claude; Boufnichel, Mohamed; Roqueta, Fabrice

    2014-03-15

    A global model has been developed for low-pressure, inductively coupled plasma (ICP) SF{sub 6}/O{sub 2}/Ar mixtures. This model is based on a set of mass balance equations for all the considered species, coupled with the discharge power balance equation and the charge neutrality condition. The present study is an extension of the kinetic global model previously developed for SF{sub 6}/Ar ICP plasma discharges [Lallement et al., Plasma Sources Sci. Technol. 18, 025001 (2009)]. It is focused on the study of the impact of the O{sub 2} addition to the SF{sub 6}/Ar gas mixture on the plasma kinetic properties. The simulation results show that the electron density increases with the %O{sub 2}, which is due to the decrease of the plasma electronegativity, while the electron temperature is almost constant in our pressure range. The density evolutions of atomic fluorine and oxygen versus %O{sub 2} have been analyzed. Those atomic radicals play an important role in the silicon etching process. The atomic fluorine density increases from 0 up to 40% O{sub 2} where it reaches a maximum. This is due to the enhancement of the SF{sub 6} dissociation processes and the production of fluorine through the reactions between SF{sub x} and O. This trend is experimentally confirmed. On the other hand, the simulation results show that O(3p) is the preponderant atomic oxygen. Its density increases with %O{sub 2} until reaching a maximum at almost 40% O{sub 2}. Over this value, its diminution with O{sub 2}% can be justified by the high increase in the loss frequency of O(3p) by electronic impact in comparison to its production frequency by electronic impact with O{sub 2}.

  3. Formation and evolution of vortices in a collisional strongly coupled dusty plasma

    NASA Astrophysics Data System (ADS)

    Jana, Sayanee; Banerjee, Debabrata; Chakrabarti, Nikhil

    2016-07-01

    Formation and evolution of vortices are studied in a collisional strongly coupled dusty plasma in the framework of a Generalized Hydrodynamic model (GH). Here we mainly present the nonlinear dynamical response of this strongly coupled system in presence of dust-neutral collisional drag. It is shown that the interplay between the nonlinear elastic stress and the dust-neutral collisional drag results in the generation of non-propagating monopole vortex for some duration before it starts to propagate like transverse shear wave. It is also found that the interaction between two unshielded monopole vortices having both same (co-rotating) and opposite (counter rotating) rotations result in the formation of two propagating dipole vortices of equal and unequal strength respectively. These results will provide some new understanding on the transport properties in such a strongly coupled system. The numerical simulation is carried out using a de-aliased doubly periodic pseudo-spectral code with Runge-Kutta-Gill time integrator.

  4. Dynamics of compressional Mach cones in a strongly coupled complex plasma

    SciTech Connect

    Bandyopadhyay, P. Dey, R.; Sen, Abhijit; Kadyan, Sangeeta

    2014-10-15

    Using a Generalised-Hydrodynamic (GH) fluid model, we study the influence of strong coupling induced modification of the fluid compressibility on the dynamics of compressional Mach cones in a dusty plasma medium. A significant structural change of lateral wakes for a given Mach number and Epstein drag force is found in the strongly coupled regime. With the increase of fluid compressibility, the peak amplitude of the normalised perturbed dust density first increases and then decreases monotonically after reaching its maximum value. It is also noticed that the opening angle of the cone structure decreases with the increase of the compressibility of the medium and the arm of the Mach cone breaks up into small structures in the velocity vector profile when the coupling between the dust particles increases.

  5. Plasma-Chemical Synthesis of Oxide Powders Using Transformer-Coupled Discharge

    NASA Astrophysics Data System (ADS)

    M. Ulanov, I.; V. Isupov, M.; Yu Litvinsev, A.; A. Mischenko, P.

    2013-04-01

    An experimental investigation of transformer-coupled discharge in an Ar-O2 mixture with the addition of SiCl4, TiCl4 and ZrCl4 has been carried out under the atmospheric pressure of plasma-forming gases. Discharge power and discharge heat losses have been determined, and the dispersion and phase composition of reaction products (oxide powders) has been analyzed with SEM and X-ray diffraction analysis. Investigations reveal the formation of ultrafine oxide powders in the case of vaporized chloride (SiCl4 and TiCl4) injecting into the transformer coupled discharge. In the case of fine powder (ZrCl4) injection, full oxidation was not observed and reaction products consisted of a mixture of ZrO2 and ZrOCl2. A conclusion has been made regarding the perspectives of using transformer-coupled discharge to produce ultrafine oxide powders.

  6. Thin-layer chromatography combined with diode laser thermal vaporization inductively coupled plasma mass spectrometry.

    PubMed

    Bednařík, Antonín; Tomalová, Iva; Kanický, Viktor; Preisler, Jan

    2014-10-17

    Here we present a novel coupling of thin-layer chromatography (TLC) to diode laser thermal vaporization inductively coupled plasma mass spectrometry (DLTV ICP MS). DLTV is a new technique of aerosol generation which uses a diode laser to induce pyrolysis of a substrate. In this case the cellulose stationary phase on aluminum-backed TLC sheets overprinted with black ink to absorb laser light. The experimental arrangement relies on economic instrumentation: an 808-nm 1.2-W continuous-wave infrared diode laser attached to a syringe pump serving as the movable stage. Using a glass tubular cell, the entire length of a TLC separation channel is scanned. The 8-cm long lanes were scanned in ∼35 s. The TLC - DLTV ICP MS coupling is demonstrated on the separation of four cobalamins (hydroxo-; adenosyl-; cyano-; and methylcobalamin) with limits of detection ∼2 pg and repeatability ∼15% for each individual species. PMID:25193171

  7. Nonlinear regime of the mode-coupling instability in 2D plasma crystals

    NASA Astrophysics Data System (ADS)

    Röcker, T. B.; Couëdel, L.; Zhdanov, S. K.; Nosenko, V.; Ivlev, A. V.; Thomas, H. M.; Morfill, G. E.

    2014-05-01

    The transition between linear and nonlinear regimes of the mode-coupling instability (MCI) operating in a monolayer plasma crystal is studied. The mode coupling is triggered at the centre of the crystal and a melting front is formed, which travels through the crystal. At the nonlinear stage, the mode coupling results in synchronisation of the particle motion and the kinetic temperature of the particles grows exponentially. After melting of the crystalline structure, the mean kinetic energy of the particles continued to grow further, preventing recrystallisation of the melted phase. The anomalous kinetic temperature obtained in the experiments could not be reproduced in simulations employing a simple point-like wake model. This shows that at the nonlinear stage of the MCI a more careful analysis is necessary.

  8. Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Marinov, D.; el Otell, Z.; Bowden, M. D.; Braithwaite, N. St. J.

    2015-12-01

    Almost electron-free (ion-ion) plasmas can be transiently formed during the afterglow phase of pulsed plasmas in electronegative gases. In ion-ion plasmas, both positive and negative ions can be extracted which makes them advantageous for a number of applications. In this paper, we investigate the extraction and acceleration of positive and negative ion beams from a pulsed inductively coupled plasma in SF6. The plasma is bounded by two electrodes biased synchronously with the discharge modulation. It is shown that when a DC bias voltage is applied during the afterglow phase, positive/negative ions are accelerated in a positive/negative space charge sheath formed in front of one of the electrodes. The energy of extracted ions closely follows the amplitude of the applied bias voltage (25-150 V) and the peak beam current density reaches 2 A m-2. With a view to using the described system as a source of energetic neutral beams for low damage material processing, simultaneous extraction and surface neutralization of positive and negative ions using an extraction electrode with high aspect ratio apertures is investigated.

  9. Kinetic modeling of E-to-H mode transition in inductively coupled hydrogen plasmas

    NASA Astrophysics Data System (ADS)

    Nishida, K.; Mattei, S.; Mochizuki, S.; Lettry, J.; Hatayama, A.

    2016-06-01

    Radio Frequency (RF) Inductively Coupled Plasmas (ICPs) are widely known for their two discharge modes, i.e., H-mode and E-mode, where the dynamics of the plasmas are completely different from each other. We have performed a kinetic simulation of a hydrogen plasma discharge in order to clarify the discharge mechanism and the E-to-H transition of the RF ICPs. The numerical simulation results, such as the time variations of spatial distribution of electron density and the power dissipated in the plasma, show the characteristic changes of the plasma dynamics due to E-to-H mode transition. Especially, the drastic change during the mode transition has been observed in the time evolution of the electron energy distribution function (EEDF). The EEDF deviates from a Maxwellian distribution before/after the transition and the deviation is more significant in the E-mode phase. These results indicate the importance of kinetic modeling for the physical understanding of E-to-H transition.

  10. Emissive Probe Measurements in a Dual-Frequency-Confined Capacitively-Coupled-Plasma System

    NASA Astrophysics Data System (ADS)

    Linnane, Shane; Ellingboe, Albert R.

    2002-10-01

    Dual frequency confined capacitively coupled plasmas (DFC-CCP) are increasingly used in semiconductor manufacturing for dielectric etching, allowing greater (and independent) control of ion energies and ion flux on the etched substrate. The powered electrode is driven with the summation of 27MHz and 2MHz sinusoidal voltages, while the other electrode is grounded. The electrode areas are similar in size, giving an electrode aspect ratio less than 2. Because of this low aspect ratio, there are large oscillations in the plasma potential. The expectation is for sinusoidal oscillations at the higher driving frequency, due to capacitive sheaths, while a rectified oscillation is expected at the lower driving frequency.(E. Kawamura, V. Vahedi, M. A. Lieberman and C. K. Birdsall, Plasma Sources Sci. Technology. 8 (1999) R45-R64 Work Supported by EURATOM.) Measurements of rf oscillation in the plasma potential taken with a floating emissive probe will be presented. The emissive probe and circuitry allows direct realtime measurement of plasma potential oscillation at both driving frequencies and the harmonics of each, thus allowing measurement of the actual potential on the driven electrode and ion energy incident on grounded electrode.

  11. On the evolution of jet energy and opening angle in strongly coupled plasma

    NASA Astrophysics Data System (ADS)

    Chesler, Paul M.; Rajagopal, Krishna

    2016-05-01

    We calculate how the energy and the opening angle of jets in {N} = 4 SYM theory evolve as they propagate through the strongly coupled plasma of that theory. We define the rate of energy loss dE jet /dx and the jet opening angle in a straightforward fashion directly in the gauge theory before calculating both holographically, in the dual gravitational description. In this way, we rederive the previously known result for dE jet /dx without the need to introduce a finite slab of plasma. We obtain a striking relationship between the initial opening angle of the jet, which is to say the opening angle that it would have had if it had found itself in vacuum instead of in plasma, and the thermalization distance of the jet. Via this relationship, we show that {N} = 4 SYM jets with any initial energy that have the same initial opening angle and the same trajectory through the plasma experience the same fractional energy loss. We also provide an expansion that describes how the opening angle of the {N} = 4 SYM jets increases slowly as they lose energy, over the fraction of their lifetime when their fractional energy loss is not yet large. We close by looking ahead toward potential qualitative lessons from our results for QCD jets produced in heavy collisions and propagating through quark-gluon plasma.

  12. Methods for detecting and correcting inaccurate results in inductively coupled plasma-atomic emission spectrometry

    DOEpatents

    Chan, George C. Y.; Hieftje, Gary M.

    2010-08-03

    A method for detecting and correcting inaccurate results in inductively coupled plasma-atomic emission spectrometry (ICP-AES). ICP-AES analysis is performed across a plurality of selected locations in the plasma on an unknown sample, collecting the light intensity at one or more selected wavelengths of one or more sought-for analytes, creating a first dataset. The first dataset is then calibrated with a calibration dataset creating a calibrated first dataset curve. If the calibrated first dataset curve has a variability along the location within the plasma for a selected wavelength, errors are present. Plasma-related errors are then corrected by diluting the unknown sample and performing the same ICP-AES analysis on the diluted unknown sample creating a calibrated second dataset curve (accounting for the dilution) for the one or more sought-for analytes. The cross-over point of the calibrated dataset curves yields the corrected value (free from plasma related errors) for each sought-for analyte.

  13. Introduction of organic solvents into inductively coupled plasmas by ultrasonic nebulization with cryogenic desolvation

    SciTech Connect

    Wiederin, D.R.; Houk, R.S.; Winge, R.K.; D'Silva, A.P. )

    1990-06-01

    A two-step desolvation system for a continuous-flow ultrasonic nebulizer reduced the solvent load on an argon inductively coupled plasma (ICP). The aerosol was first heated above the boiling point of the solvent. Subsequently, solvent vapor was removed in two condensers kept at {minus}10{degree}C and {approx equal}{minus}80{degree}C. No special plasma ignition procedures were required; a change of solvent did not cause plasma instability. The plasma was stable to a forward power as low as 0.5 kW when methanol, acetone, acetonitrile, or ethanol was nebulized. The plasma could not be sustained while organic solvents were ultrasonically nebulized without at least partial desolvation. Detection limits for metals ranged from 0.2 {mu}g L{sup {minus}1} for Fe to 5 {mu}g L{sup {minus}1} for Pb. The detection limits for each element were approximately the same regardless of the organic solvent used and were comparable to those obtained during ultrasonic nebulization of aqueous solutions. With a forward power of 1.0 kW, molecular band emission from C{sub 2} was about 25 times less than when the aerosol was partially desolvated using a condensation temperature of {minus}10{degree}C.

  14. Nanofabrication using home-made RF plasma coupled chemical vapour deposition system

    NASA Astrophysics Data System (ADS)

    Ong, Si Ci; Ilyas, Usman; Rawat, Rajdeep Singh

    2014-08-01

    Zinc oxide, ZnO, a popular semiconductor material with a wide band gap (3.37 eV) and high binding energy of the exciton (60 meV), has numerous applications such as in optoelectronics, chemical/biological sensors, and drug delivery. This project aims to (i) optimize the operating conditions for growth of ZnO nanostructures using the chemical vapor deposition (CVD) method, and (ii) investigate the effects of coupling radiofrequency (RF) plasma to the CVD method on the quality of ZnO nanostructures. First, ZnO nanowires were synthesized using a home-made reaction setup on gold-coated and non-coated Si (100) substrates at 950 °C. XRD, SEM, EDX, and PL measurements were used for characterizations and it was found that a deposition duration of 10 minutes produced the most well-defined ZnO nanowires. SEM analysis revealed that the nanowires had diameters ranging from 30-100 mm and lengths ranging from 1-4 µm. In addition, PL analysis showed strong UV emission at 380 nm, making it suitable for UV lasing. Next, RF plasma was introduced for 30 minutes. Both remote and in situ RF plasma produced less satisfactory ZnO nanostructures with poorer crystalline structure, surface morphology, and optical properties due to etching effect of energetic ions produced from plasma. However, a reduction in plasma discharge duration to 10 minutes produced thicker and shorter ZnO nanostructures. Based on experimentation conducted, it is insufficient to conclude that RF plasma cannot aid in producing well-defined ZnO nanostructures. It can be deduced that the etching effect of energetic ions outweighed the increased oxygen radical production in RF plasma nanofabrication.

  15. Conceptual study of moderately coupled plasmas and experimental comparison of laboratory x-ray sources

    SciTech Connect

    Li, C.

    1993-12-01

    In this thesis the fundamental concepts of moderately coupled plasmas, for which 2{approx_lt}ln{Lambda}{sub b}{approx_lt}10, are, for the first time, presented. This investigation is motivated because neither the conventional Fokker-Planck approximation [for weakly coupled plasmas (ln{Lambda}{sub b}{approx_lt}10)] nor the theory of dielectric response with correlations for strongly coupled plasmas (ln{Lambda}{sub b}{approx_lt}1) has satisfactorily addressed this regime. Specifically, herein the standard Fokker-Planck operator for Coulomb collisions has been modified to include hitherto neglected terms that are directly associated with large-angle scattering. In addition a reduced electron-ion collision operator has been calculated that, for the first time, manifests 1/ln{Lambda}{sub b} corrections. Precise calculations of some relaxation rates and crude calculations of electron transport coefficients have been made. As one of major applications of the modified Fokker-Planck equation, the stopping powers and {rho}R have been calculated for charged fusion products ({alpha}`s, {sup 3}H, {sup 3}He) and hot electrons interacting with plasmas relevant to inertial confinement fusion. In the second major topic of this thesis, advances made in the area of laboratory x-ray sources are presented. First, and most importantly, through the use a Cockcroft-Walton linear accelerator, a charged particle induced x-ray emission (PIXE) source has been developed. Intense line x radiation (including K-, L-, M-, and N-lines) with wavelengths from 0.5 {angstrom} to 111 {angstrom} have been successfully produced. Second, a new high intensity electron-beam x-ray generator has also been developed, and it has been used with advantage in the soft x-ray region ( < 3 keV). Finally, a direct comparisons of both sources (PIXE and electron-beam x-ray sources) to a commercially available radioactive {alpha} fluorescent x-ray source has been made.

  16. EVALUATION OF A MULTICHANNEL INDUCTIVELY COUPLED PLASMA-OPTICAL EMISSION SPECTROMETER MODIFIED TO MINIMIZE AND CORRECT SCATTERED LIGHT EFFECTS

    EPA Science Inventory

    In a study of an inductively coupled plasma optical emission spectrometer, data from an early commercially available instrument are compared with data from the same instrument after modifications to correct observed inadequacies were made. Results show negligible changes in power...

  17. Experimental measurement of plasma parameters and electron energy distribution in ferrite-core side type Ar/He inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Han, Duksun; Bang, Jin-Young; Lee, Hyo-Chang; Chung, Chin-Wook

    2012-10-01

    Spatial distributions of a plasma density and an effective electron temperature (Teff) were studied from the measurement of an electron energy probability function (EEPF) in the side type ferrite-core inductively coupled plasma with an argon-helium mixture. As the helium gas was diluted at the fixed total gas pressure of 5 mTorr in an argon discharge, the distribution of the plasma density was changed from a concave to a flat, and finally became a convex, while all spatial profiles of Teff were the hollow shapes with the helium dilution. This evolution of the plasma uniformity with the helium gas could be explained by the increased energy relaxation length and the changed plasma potential, indicating the transition of the electron kinetics from the local to non-local kinetics. From this result, it is expected that the addition of helium gas could be applied as a method to control the plasma uniformity in a large area plasma processing.

  18. Tin removal from extreme ultraviolet collector optics by inductively coupled plasma reactive ion etching

    SciTech Connect

    Shin, H.; Srivastava, S. N.; Ruzic, D. N.

    2008-05-15

    Tin (Sn) has the advantage of delivering higher conversion efficiency compared to other fuel materials (e.g., Xe or Li) in an extreme ultraviolet (EUV) source, a necessary component for the leading next generation lithography. However, the use of a condensable fuel in a lithography system leads to some additional challenges for maintaining a satisfactory lifetime of the collector optics. A critical issue leading to decreased mirror lifetime is the buildup of debris on the surface of the primary mirror that comes from the use of Sn in either gas discharge produced plasma (GDPP) or laser produced plasma (LPP). This leads to a decreased reflectivity from the added material thickness and increased surface roughness that contributes to scattering. Inductively coupled plasma reactive ion etching with halide ions is one potential solution to this problem. This article presents results for etch rate and selectivity of Sn over SiO{sub 2} and Ru. The Sn etch rate in a chlorine plasma is found to be much higher (of the order of hundreds of nm/min) than the etch rate of other materials. A thermally evaporated Sn on Ru sample was prepared and cleaned using an inductively coupled plasma etching method. Cleaning was confirmed using several material characterization techniques. Furthermore, a collector mock-up shell was then constructed and etching was performed on Sn samples prepared in a Sn EUV source using an optimized etching recipe. The sample surface before and after cleaning was analyzed by atomic force microscopy, x-ray photoelectron spectroscopy, and Auger electron spectroscopy. The results show the dependence of etch rate on the location of Sn samples placed on the collector mock-up shell.

  19. Pulsed Cl2/Ar inductively coupled plasma processing: 0D model versus experiments

    NASA Astrophysics Data System (ADS)

    Despiau-Pujo, E.; Brihoum, M.; Bodart, P.; Darnon, M.; Cunge, G.

    2014-11-01

    Comparisons between measurements and spatially-averaged (0D) simulations of low-pressure Ar and Cl2 pulsed-plasmas in an industrial inductively coupled reactor are reported. Our analysis focuses on the impact of the pulsing parameters (frequency f, duty cycle dc) on the chemical reactivity of the plasma and on the ion fluxes to the walls. Charged particle densities and ion fluxes are highly modulated when the plasma is pulsed at 1 kHz < f < 20 kHz. In rare gas Ar plasmas, the ion flux rise time is short (50 μs), therefore the dc has almost no influence on the ion flux value during the pulse. By contrast, in molecular electronegative Cl2 plasmas, both the value and rise/decay time of the ion flux during the on and off-periods depend strongly on the dc. This is because in Cl2 both the plasma chemistry and electronegativity depend on the dc. During the off-period, the electron density drops much faster than the negative ion density, leading to a large increase in plasma electronegativity. A minimum afterglow time (75 µs) is required for an ion-ion plasma to form and for the sheath to collapse, exposing the walls and wafers to a negative ion flux. The positive ion flux is 3 to 10 times smaller in Cl2 than in Ar for the same operating conditions. In contrast with charged species, the radical (Cl) kinetics are slow and thus the radical density is hardly modulated for f > 1 kHz. However, the dc strongly influences the Cl2/Cl density ratio and is an excellent knob for controlling the plasma chemical reactivity: the higher the dc the higher the Cl density. The trends and quantities in the 0D simulation are in close agreement with experiments. This proves the capacity of global models to reproduce the fundamental features of pulsed plasmas in simple chemistries and to assist the development of pulsed processes.

  20. Schlieren photographs and internal pressure distributions for three-dimensional sidewall-compression scramjet inlets at a Mach number of 6 in CF4

    NASA Technical Reports Server (NTRS)

    Holland, Scott D.

    1993-01-01

    Three-dimensional sidewall-compression scramjet inlets with leading-edge sweeps of 30 deg and 70 deg were tested in the Langley Hypersonic CF4 Tunnel at a Mach number of 6 and a free-stream ratio of specific heats of 1.2. The parametric effects of leading-edge sweep, cowl position, contraction ratio, and Reynolds number were investigated. The models were instrumented with static pressure orifices distributed on the sidewalls, baseplate, and cowl. Schlieren movies were made of selected tunnel runs for flow visualization of the entrance plane and cowl region. Although these movies could not show the internal flow, the effect of the internal flow on the external flow was evident by way of spillage. The purpose is to provide a preliminary data release for the investigation. The models, facility, and testing methods are described, and the test matrix and a tabulation of tunnel runs are provided. Line plots highlighting the stated parametric effects and a representative set of schlieren photographs are presented without analysis.

  1. CH_4, C_2H_4, SF_6 and CF_4 Calculated Spectroscopic Databases for the Virtual Atomic and Molecular Data Centre

    NASA Astrophysics Data System (ADS)

    Boudon, Vincent; Wenger, Christian; Surleau, Romain; Louviot, Maud; Faye, Mbaye; Rotger, Maud; Daumont, Ludovic; Bonhommeau, David A.; Tyuterev, Vladimir; Ba, Yaye Awa; Dubernet, Marie-Lise

    2014-06-01

    Two spectroscopic relational databases, denoted MeCaSDa and ECaSDa, have been implemented for methane and ethene, and included in VAMDC (Virtual Atomic and Molecular Data Centre, http://portal.vamdc.eu/vamdc_portal/home.seam) [1]. These databases collect calculated spectroscopic data from the accurate analyses previously performed for the electronic ground state of methane, ethene, and some of their isotopologues: 12CH_4, 13CH_4, and 12C_2H_4 [2]. Both infrared absorption and Raman scattering lines are included. The polyad structures are reported and the transitions are precisely described by their energy, their intensity and the full description of the lower and upper states involved in the transitions. Very recently, we also built on the same model two new databases, named SHeCaSDa and TFMeCaSDa for the SF_6 and CF_4 greenhouse gas molecules, respectively. The relational schemas of these four databases are equivalent and optimized to enable the better compromise between data retrieval and compatibility with the XSAMS (XML Schema for Atoms, Molecules, and Solids) format adopted within the VAMDC European project. [1] Y. A. Ba, Ch. Wenger et al., J. Quant. Spectrosc. Radiat. Transfer, 130, 62 (2013). [2] M.-L. Dubernet, V. Boudon et al., J. Quant. Spectrosc. Radiat. Transfer, 111, 2151 (2010).

  2. CH(4), C(2)H(4), SF(6) and CF(4) Calculated Spectroscopic Databases for the Virtual Atomic and Molecular Data Centre

    NASA Astrophysics Data System (ADS)

    Boudon, V.; Wenger, Ch.; Surleau, R.; Louviot, M.; Faye, M.; Rotger, M.; Daumont, L.; Bonhommeau, D. A.; Tyuterev, Vl. G.; Ba, Y. A.; Dubernet, M.-L.

    2014-06-01

    Two spectroscopic relational databases, denoted MeCaSDa and ECaSDa, have been implemented for methane and ethene, and included in the VAMDC (Virtual Atomic and Molecular Data Centre, http://portal.vamdc.eu/vamdc portal/home.seam)1. These databases collect calculated spectroscopic data from the accurate analyses previously performed for the electronic ground state of methane, ethene, and some of their isotopologues: 12CH4, 13CH4, and 12C2H4 2. Both infrared absorption and Raman scattering lines are included. The polyad structures are reported and the transitions are precisely described by their energy, their intensity, and the full description of the lower and upper states involved in the transitions. Very recently, we also built on the same model two new databases, named SHeCaSDa and TFMeCaSDa for the SF6 and CF4 greenhouse gas molecules, respectively. The relational schemas of these four databases are equivalent and optimized to enable the better compromise between data retrieval and compatibility with the XSAMS (XML Schema for Atoms, Molecules, and Solids) format adopted within the VAMDC European project.

  3. Prediction of the dielectric strength for c-C4F8 mixtures with CF4, CO2, N2, O2 and air by Boltzmann equation analysis

    NASA Astrophysics Data System (ADS)

    Li, Xingwen; Zhao, Hu; Jia, Shenli; Murphy, Anthony B.

    2014-10-01

    The dielectric strength of c-C4F8, and mixtures of c-C4F8 with CF4, CO2, N2, O2 and air, is studied through solution of the Boltzmann equation. The reduced ionization coefficient α/N and reduced attachment coefficient η/N are calculated, allowing the reduced effective ionization coefficient (α-η)/N and the critical reduced electric field strength (E/N)cr (the reduced electric field for which (α-η)/N = 0), to be determined. A high value of (E/N)cr for an electronegative gas, such as those considered here, indicates good insulating properties. It is found that c-C4F8-N2 and c-C4F8-air have very similar (E/N)cr values, higher than those of the other three mixtures, and superior even to that of pure SF6 for c-C4F8 concentrations above 80%. Comparison of the results obtained for c-C4F8 and c-C4F8-N2 with experimental values from the literature supports the validity of the approach taken here and the parameters used.

  4. Simulation of low-pressure inductively coupled plasmas: Non-local effects and pulsed power operation

    NASA Astrophysics Data System (ADS)

    Ramamurthi, Badri

    For modeling of low-pressure Inductively Coupled Plasma (ICP) discharges, a number of approaches have been proposed with varying degree of complexity. A self-consistent 1-D model was developed in this work to study the effects of non-local electron conductivity on power absorption and plasma density profiles in a planar inductively coupled argon discharge at low pressures (< 10 mTorr). The self-consistent kinetic description of the discharge included three modules: (1) an EEDF module to compute a non-Maxwellian EEDF, (2) a non-local electron conductivity module which predicted current distribution in the plasma as an integral over the electric field and solved Maxwell's equations to find the self-consistent electric field as well as the non-local power deposition profile and (3) a Heavy Species Transport (HST) module which solved for the ion and metastable atom density and velocity. Results from the full model were then compared with those obtained by using a local conductivity model (Ohm's law) for the RF current. For 10 mTorr, the EEDF was found to be almost Maxwellian with electron temperature ˜ 3 V. As a result, the plasma density profiles obtained from the local and non-local cases were almost identical for the same total power. Interestingly, a similar result was obtained even for a pressure of 1 mTorr where the EEDF was non-Maxwellian. This suggests that as far as species density and flux are concerned, local conductivity models, with lesser computational expense, can be employed even in the non-local regime. Comparisons between simulation and experiment for RF field and current density showed better agreement for non-local model compared with local model. A two-dimensional (r,z) continuum model was then developed to study the spatio-temporal dynamics of a pulsed power (square-wave modulated) discharge in argon (electropositive) and chlorine (electronegative) sustained in an inductively coupled plasma (ICP) reactor with a planar coil. The self

  5. Comparison of various interpretation methods of the electric probe measurements in inductively coupled Ar and O{sub 2} plasmas

    SciTech Connect

    Woo Seo, Min; Keun Bae, Min; Chung, T. H.

    2014-02-15

    In low-pressure inductively coupled argon and oxygen discharges, the plasma density and electron temperature and the electron energy distribution function (EEDF) were obtained by using a cylindrical electric probe. The plasma densities were determined by various methods to interpret the probe current-voltage characteristic curve: the EEDF integration, the electron saturation current, the ion current at the floating potential, and the orbital-motion-limited (OML) ion current. Quite a good agreement exists between the plasma densities determined by various classical methods. Although the probe technique has some limitation in electronegative plasmas, the plasma densities determined from OML theory compare well with those measured by the ion saturation current at the floating potential in the oxygen discharges. In addition, the EEDFs of inductively coupled Ar and oxygen plasmas are observed to be nearly Maxwellian at the pressure range of 1-40 mTorr.

  6. Influence of frequency on the characteristics of VHF capacitively coupled plasmas in a 300 mm chamber

    NASA Astrophysics Data System (ADS)

    Hebner, G. A.; Barnat, E. V.; Miller, P. A.; Paterson, A.; Holland, J.; Lill, T.

    2004-09-01

    We have investigated the characteristics of VHF capacitively coupled plasmas produced in a modified Applied Materials chamber. The chamber had a 14-inch diameter upper electrode (source) that was driven at 10 to 160 MHz and a 300 mm diameter electrostatic chuck with a ceramic process kit that was driven at 13.56 MHz (bias). Diagnostics employed include a microwave interferometer to measure the line-integrated electron density, a hairpin microwave resonator to measure the spatially resolved electron density, absorption spectroscopy to determine the argon metastable temperature and density, laser induced fluorescence (LIF) to determine the spatial distribution of the excited species, and spatially resolved optical emission. We found that for constant source rf power, the electron density increased with rf frequency. The argon 1s5 metastable temperature was slightly above room temperature (300 - 400K), significantly cooler than our previous measurements in inductively coupled plasmas. The metastable density was not a strong function of source frequency or rf power. The metastable spatial distribution was always peaked in the center of the chamber and had a weak dependence on frequency. Scaling of the plasma parameters with frequency, power and pressure, and implications to energy deposition models will be discussed. This work was supported by Applied Materials and Sandia National Laboratories, a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company for the United States Department of Energy's National Nuclear Security Administration under contract DE-AC04-94AL85000.

  7. Doppler broadening of atomic-hydrogen lines in DC and capacitively coupled RF plasmas

    NASA Astrophysics Data System (ADS)

    Akhtar, Kamran; Scharer, J. E.; Mills, R. L.

    2007-10-01

    The extraordinary broadening of Balmer lines of hydrogen admixed with Ar or He as opposed to Xe in DC glow and capacitively coupled rf discharges is studied over a wide range of pressure and gas compositions. High-resolution optical emission spectroscopy is performed parallel to (end-on) and perpendicular (side-on) to the electrode axis along with Langmuir probe measurements of plasma density and electron temperature for the RF capacitive discharge case. A broad and symmetric (Gaussian) Balmer emission line corresponding to 20-60 eV hydrogen atom temperatures is observed in Ar/H2 and He/H2 plasmas. Energy is transferred selectively to hydrogen atoms whereas the atoms of admixed He and Ar gases remain cold (<0.5 eV). In the field acceleration model [e.g., Cvetanovic et. al. J. App. Phys., Vol. 97, 033302-1, 2005] there apparently is no preferred species to which energy is coupled and according to the model one should observe enhanced temperatures of hydrogen and helium atoms in He/H2 discharges where the atomic mass is more comparable (4:1). We also briefly examine the experimental results using the Resonance Transfer Model of hydrogen heating [Mills et. al IEEE Trans. Plasma Sci., 31, 338, 2003] as the source of broadening.

  8. Analytic formulation for the ac electrical conductivity in two-temperature, strongly coupled, overdense plasma: FORTRAN subroutine

    NASA Astrophysics Data System (ADS)

    Cauble, R.; Rozmus, W.

    1993-10-01

    A FORTRAN subroutine for the calculation of the ac electrical conductivity in two-temperature, strongly coupled, overdense plasma is presented. The routine is the result of a model calculation based on classical transport theory with application to plasmas created by the interaction of short pulse lasers and solids. The formulation is analytic and the routine is self-contained.

  9. Thermochemical Nonequilibrium 2D Modeling of Nitrogen Inductively Coupled Plasma Flow

    NASA Astrophysics Data System (ADS)

    Yu, Minghao; Yusuke, Takahashi; Hisashi, Kihara; Ken-ichi, Abe; Kazuhiko, Yamada; Takashi, Abe; Satoshi, Miyatani

    2015-09-01

    Two-dimensional (2D) numerical simulations of thermochemical nonequilibrium inductively coupled plasma (ICP) flows inside a 10-kW inductively coupled plasma wind tunnel (ICPWT) were carried out with nitrogen as the working gas. Compressible axisymmetric Navier-Stokes (N-S) equations coupled with magnetic vector potential equations were solved. A four-temperature model including an improved electron-vibration relaxation time was used to model the internal energy exchange between electron and heavy particles. The third-order accuracy electron transport properties (3rd AETP) were applied to the simulations. A hybrid chemical kinetic model was adopted to model the chemical nonequilibrium process. The flow characteristics such as thermal nonequilibrium, inductive discharge, effects of Lorentz force were made clear through the present study. It was clarified that the thermal nonequilibrium model played an important role in properly predicting the temperature field. The prediction accuracy can be improved by applying the 3rd AETP to the simulation for this ICPWT. supported by Grant-in-Aid for Scientific Research (No. 23560954), sponsored by the Japan Society for the Promotion of Science

  10. Fundamental studies of the plasma extraction and ion beam formation processes in inductively coupled plasma mass spectrometry

    SciTech Connect

    Niu, Hongsen

    1995-02-10

    The fundamental and practical aspects are described for extracting ions from atmospheric pressure plasma sources into an analytical mass spectrometer. Methodologies and basic concepts of inductively coupled plasma mass spectrometry (ICP-MS) are emphasized in the discussion, including ion source, sampling interface, supersonic expansion, slumming process, ion optics and beam focusing, and vacuum considerations. Some new developments and innovative designs are introduced. The plasma extraction process in ICP-MS was investigated by Langmuir measurements in the region between the skimmer and first ion lens. Electron temperature (T{sub e}) is in the range 2000--11000 K and changes with probe position inside an aerosol gas flow. Electron density (n{sub e}) is in the range 10{sup 8}--10{sup 10} {sup {minus}cm }at the skimmer tip and drops abruptly to 10{sup 6}--10{sup 8} cm{sup {minus}3} near the skimmer tip and drops abruptly to 10{sup 6}--10{sup 8} cm{sup {minus}3} downstream further behind the skimmer. Electron density in the beam leaving the skimmer also depends on water loading and on the presence and mass of matrix elements. Axially resolved distributions of electron number-density and electron temperature were obtained to characterize the ion beam at a variety of plasma operating conditions. The electron density dropped by a factor of 101 along the centerline between the sampler and skimmer cones in the first stage and continued to drop by factors of 10{sup 4}--10{sup 5} downstream of skimmer to the entrance of ion lens. The electron density in the beam expansion behind sampler cone exhibited a 1/z{sup 2} intensity fall-off (z is the axial position). An second beam expansion originated from the skimmer entrance, and the beam flow underwent with another 1/z{sup 2} fall-off behind the skimmer. Skimmer interactions play an important role in plasma extraction in the ICP-MS instrument.

  11. Bulk plasma fragmentation in a C{sub 4}F{sub 8} inductively coupled plasma: A hybrid modeling study

    SciTech Connect

    Zhao, Shu-Xia; Zhang, Yu-Ru; Gao, Fei; Wang, You-Nian; Bogaerts, Annemie

    2015-06-28

    A hybrid model is used to investigate the fragmentation of C{sub 4}F{sub 8} inductive discharges. Indeed, the resulting reactive species are crucial for the optimization of the Si-based etching process, since they determine the mechanisms of fluorination, polymerization, and sputtering. In this paper, we present the dissociation degree, the density ratio of F vs. C{sub x}F{sub y} (i.e., fluorocarbon (fc) neutrals), the neutral vs. positive ion density ratio, details on the neutral and ion components, and fractions of various fc neutrals (or ions) in the total fc neutral (or ion) density in a C{sub 4}F{sub 8} inductively coupled plasma source, as well as the effect of pressure and power on these results. To analyze the fragmentation behavior, the electron density and temperature and electron energy probability function (EEPF) are investigated. Moreover, the main electron-impact generation sources for all considered neutrals and ions are determined from the complicated C{sub 4}F{sub 8} reaction set used in the model. The C{sub 4}F{sub 8} plasma fragmentation is explained, taking into account many factors, such as the EEPF characteristics, the dominance of primary and secondary processes, and the thresholds of dissociation and ionization. The simulation results are compared with experiments from literature, and reasonable agreement is obtained. Some discrepancies are observed, which can probably be attributed to the simplified polymer surface kinetics assumed in the model.

  12. Effect of Rf Ground Location in an Inductively Coupled Plasma Reactor on the Plasma Density and Ion Energy

    NASA Astrophysics Data System (ADS)

    Radovanov, Svetlana; Anderson, Harold; Bell, Gary; Zhang, Hong-Mei; Hoffman, Dan; Resta, Victoria; Rasmussen, Dave

    1996-10-01

    Measurements of the electromagnetic (EM) fields, plasma density and ion energy distribution (IED)were performed in a high density ICP etch tool.The obtained EM fields have shown that a virtual radio frequency (RF) ground exists on the current strap. A set of experiments were performed to investigate the impact of altering the location of this RF ground on the EM fields produced and on the uniformity of the plasma density and ion energy distribution. Vacuum RF field measurements for "virtual" and "imposed" ground configurations show a dramatic effect on the electric and magnetic fields. In the standard "virtual" ground case (ground located near the outer edge of the coil), the electric field magnitude is center peaked, while in the "imposed" ground mode (ground shifted toward the coil center), the electric field magnitude has an annular shape. A miniaturized retarding grid ion energy analyzer (mini-IEA) was used to determine radial profiles of the ion saturation current and ion energy distribution (IED)[1]. Radial profiles of the ion current in the "virtual" ground mode are uniform and IEDs are sharp and narrow. In the "imposed" ground mode an annular shaped profile was obtained. The IEDs are significantly broadened, suggesting a larger electrostatic coupling component to the discharge. The changes in the IED are important owing to their impact on the isotropy of etching of microelectronic devices and uniformity of plasma generation. ( G.W. Gibson, Jr, H.H. Sawin, I. Tepermeister, D.E.Ibbotson, and J.T.C. Lee, J. Vac. Sci. Technol. B, 12, 2333 (1994).)

  13. External control of electron energy distributions in a dual tandem inductively coupled plasma

    SciTech Connect

    Liu, Lei; Sridhar, Shyam; Zhu, Weiye; Donnelly, Vincent M. Economou, Demetre J.; Logue, Michael D.; Kushner, Mark J.

    2015-08-28

    The control of electron energy probability functions (EEPFs) in low pressure partially ionized plasmas is typically accomplished through the format of the applied power. For example, through the use of pulse power, the EEPF can be modulated to produce shapes not possible under continuous wave excitation. This technique uses internal control. In this paper, we discuss a method for external control of EEPFs by transport of electrons between separately powered inductively coupled plasmas (ICPs). The reactor incorporates dual ICP sources (main and auxiliary) in a tandem geometry whose plasma volumes are separated by a grid. The auxiliary ICP is continuously powered while the main ICP is pulsed. Langmuir probe measurements of the EEPFs during the afterglow of the main ICP suggests that transport of hot electrons from the auxiliary plasma provided what is effectively an external source of energetic electrons. The tail of the EEPF and bulk electron temperature were then elevated in the afterglow of the main ICP by this external source of power. Results from a computer simulation for the evolution of the EEPFs concur with measured trends.

  14. Inductively coupled plasma mass spectrometry in the analysis of biological samples and pharmaceutical drugs

    NASA Astrophysics Data System (ADS)

    Ossipov, K.; Seregina, I. F.; Bolshov, M. A.

    2016-04-01

    Inductively coupled plasma mass spectrometry (ICP-MS) is widely used in the analysis of biological samples (whole blood, serum, blood plasma, urine, tissues, etc.) and pharmaceutical drugs. The shortcomings of this method related to spectral and non-spectral interferences are manifested in full measure in determination of the target analytes in these complex samples strongly differing in composition. The spectral interferences are caused by similarity of masses of the target component and sample matrix components. Non-spectral interferences are related to the influence of sample matrix components on the physicochemical processes taking place during formation and transportation of liquid sample aerosols into the plasma, on the value and spatial distribution of plasma temperature and on the transmission of the ion beam from the interface to mass spectrometer detector. The review is devoted to analysis of different mechanisms of appearance of non-spectral interferences and to ways for their minimization or elimination. Special attention is paid to the techniques of biological sample preparation, which largely determine the mechanisms of the influence of sample composition on the results of element determination. The ways of lowering non-spectral interferences by instrumental parameter tuning and application of internal standards are considered. The bibliography includes 189 references.

  15. High sensitivity ultra-broad-band absorption spectroscopy of inductively coupled chlorine plasma

    NASA Astrophysics Data System (ADS)

    Marinov, Daniil; Foucher, Mickaël; Campbell, Ewen; Brouard, Mark; Chabert, Pascal; Booth, Jean-Paul

    2016-06-01

    We propose a method to measure the densities of vibrationally excited Cl2(v) molecules in levels up to v  =  3 in pure chlorine inductively coupled plasmas (ICPs). The absorption continuum of Cl2 in the 250–450 nm spectral range is deconvoluted into the individual components originating from the different vibrational levels of the ground state, using a set of ab initio absorption cross sections. It is shown that gas heating at constant pressure is the major depletion mechanism of the Cl2 feedstock in the plasma. In these line-integrated absorption measurements, the absorption by the hot (and therefore rarefied) Cl2 gas in the reactor centre is masked by the cooler (and therefore denser) Cl2 near the walls. These radial gradients in temperature and density make it difficult to assess the degree of vibrational excitation in the centre of the reactor. The observed line-averaged vibrational distributions, when analyzed taking into account the radial temperature gradient, suggest that vibrational and translational degrees of freedom in the plasma are close to local equilibrium. This can be explained by efficient vibrational-translational (VT) relaxation between Cl2 and Cl atoms. Besides the Cl2(v) absorption band, a weak continuum absorption is observed at shorter wavelengths, and is attributed to photodetachment of Cl‑ negative ions. Thus, line-integrated densities of negative ions in chlorine plasmas can be directly measured using broad-band absorption spectroscopy.

  16. Final Scientific/Technical Report for "Strongly-Coupled Dusty Plasmas"

    SciTech Connect

    John Goree

    2010-08-14

    The subject of the project is the basic-plasma physics topic of strongly-coupled plasmas, as studied experimentally using dusty plasmas. This topic is highly interdisciplinary, with significant overlap with astrophysics, space physics, and condensed matter physics. Among the successes of this project during the most recent four-year period are the 23 papers were produced for peer-reviewed scientific journals. These papers mostly report experiments, as well as some numerical simulations. Coauthors of the papers include collaborators in Germany, Hungary, and Russia, as well as the U.S. Research topics included traditional plasma physics themes such as transport, waves, instabilities, and experimental diagnostics. They also included interdisciplinary topics of melting (condensed matter physics) and rarefied gas dynamics (fluid mechanics). All of the research topics were chosen to have a high impact. Our success in achieving a high impact is demonstrated by the seven papers published in Physical Review Letters over a four-year period, and a significant number of invited talks. The project included a broader-impact element that included not only training of graduate students and public dissemination of research results, but also an outreach program. The outreach Included presentations motivated by the sound-wave experiments in this project for the 'Family Science Adventures' (for children and parents of Iowa City area) and hands-on experiments at a K12 school (3rd and 4th grades in 2007, and 5th and 6th grades in 2008).

  17. Coupling Hydrodynamics to Nonequilibrium Degrees of Freedom in Strongly Interacting Quark-Gluon Plasma

    NASA Astrophysics Data System (ADS)

    Heller, Michal P.; Janik, Romuald A.; Spaliński, Michał; Witaszczyk, Przemysław

    2014-12-01

    Relativistic hydrodynamics simulations of quark-gluon plasma play a pivotal role in our understanding of heavy ion collisions at RHIC and LHC. They are based on a phenomenological description due to Müller, Israel, Stewart (MIS) and others, which incorporates viscous effects and ensures a well-posed initial value problem. Focusing on the case of conformal plasma we propose a generalization which includes, in addition, the dynamics of the least damped far-from-equilibrium degree of freedom found in strongly coupled plasmas through the AdS/CFT correspondence. We formulate new evolution equations for general flows and then test them in the case of N =4 super Yang-Mills plasma by comparing their solutions alongside solutions of MIS theory with numerical computations of isotropization and boost-invariant flow based on holography. In these tests the new equations reproduce the results of MIS theory when initialized close to the hydrodynamic stage of evolution, but give a more accurate description of the dynamics when initial conditions are set in the preequilibrium regime.

  18. Rapid heating of a strongly coupled plasma at the solid-liquid phase transition

    NASA Astrophysics Data System (ADS)

    Jensen, M. J.; Hasegawa, T.; Bollinger, J. J.; Dubin, D. H. E.

    2004-11-01

    Between 10^4 and 10^6 ^9Be^+ ions are trapped in a 4.5 Tesla Penning trap and laser-cooled to ˜1 mK, where the ions form a crystalline plasma with an interparticle spacing of ˜20 μm. This system is a realization of a strongly coupled one-component plasma. Using Doppler laser spectroscopy on a single-photon transition, we measured the temperature and heating rate of this plasma when not being laser-cooled. We measured a slow heating rate of ≤ 100 mK/s due to residual gas collisions for the first 100-200 ms after turning off the cooling laser. This slow heating is followed by a rapid heating to 1-2 K in 100 ms as the plasma undergoes the solid-liquid phase transition at T=10 mK (Γ ˜ 170). We will present evidence that this rapid heating is due to a sudden release of energy from weakly cooled degrees of freedom involving the cyclotron motion of trapped impurity ions. We will also discuss the prospects for observing the latent heat associated with the phase transition.

  19. Characterization of stationary and pulsed inductively coupled RF discharges for plasma sterilization

    NASA Astrophysics Data System (ADS)

    Gans, T.; Osiac, M.; O'Connell, D.; Kadetov, V. A.; Czarnetzki, U.; Schwarz-Selinger, T.; Halfmann, H.; Awakowicz, P.

    2005-05-01

    Sterilization of bio-medical materials using radio frequency (RF) excited inductively coupled plasmas (ICPs) has been investigated. A double ICP has been developed and studied for homogenous treatment of three-dimensional objects. Sterilization is achieved through a combination of ultraviolet light, ion bombardment and radical treatment. For temperature sensitive materials, the process temperature is a crucial parameter. Pulsing of the plasma reduces the time average heat strain and also provides additional control of the various sterilization mechanisms. Certain aspects of pulsed plasmas are, however, not yet fully understood. Phase resolved optical emission spectroscopy and time resolved ion energy analysis illustrate that a pulsed ICP ignites capacitively before reaching a stable inductive mode. Time resolved investigations of the post-discharge, after switching off the RF power, show that the plasma boundary sheath in front of a substrate does not fully collapse for the case of hydrogen discharges. This is explained by electron heating through super-elastic collisions with vibrationally excited hydrogen molecules.

  20. Electrical asymmetry effect for controlling the transport of micrometer-sized particles in capacitively coupled plasmas

    NASA Astrophysics Data System (ADS)

    Iwashita, Shinya; Schuengel, Edmund; Schulze, Julian; Uchida, Giichiro; Koga, Kazunori; Hartmann, Peter; Shiratani, Masaharu; Donko, Zoltan; Czarnetzki, Uwe

    2012-10-01

    We have developed a novel method to control the dust particle transport in capacitively coupled plasmas via the electrical asymmetry effect (EAE) [1]. At low pressures the EAE allows controlling the spatial potential profile and the ion density distribution by adjusting the phase angle between a fundamental frequency and its second harmonic, resulting in control of forces exerted on dust particles such as electrostatic and ion drag forces. We report the experimental results of this method using SiO2 particles of 1.5 μm in size, which are inserted into an argon discharge. Initially dust particles tend to be confined at the sheath edge near the bottom electrode, and the change of their equilibrium position with plasma due to the adiabatic phase shift can be well understood by the electric field profile obtained from a simple analytical model. By applying the abrupt change of phase angle from 90 to 0 dust particles are transported between both sheaths through the plasma bulk [1]. Based on the model of this transport [1] the potential profile can be obtained by experimental results.[4pt] [1] Iwashita S et al., Plasma Sources Sci. Technol. 21 (2012) 032001.

  1. Numerical simulations of electrical asymmetry effect on electronegative plasmas in capacitively coupled rf discharge

    NASA Astrophysics Data System (ADS)

    Zhang, Quan-Zhi; Jiang, Wei; Hou, Lu-Jing; Wang, You-Nian

    2011-01-01

    Recently a so-called electrical asymmetry effect (EAE), which could achieve high-degree separate control of ion flux and energy in dual-frequency capacitively coupled radio-frequency (CCRF) discharges, was discovered theoretically by Heil et al. [J. Phys. D: Appl. Phys. 41, 165202 (2008)] and was confirmed by experiments and theory/numerical simulations later on for electropositive argon discharges. In this work simulations based on particle-in-cell/Monte Carlo collision are performed to study the EAE on electronegative oxygen plasmas in geometrically symmetric CCRF discharges. Dual frequency discharges operating at 13.56 and 27.12 MHz are simulated for different pressures and the results are compared with those of electropositive argon discharges at the same conditions. It is found that in general the EAE on oxygen discharges has similar behavior as on argon discharge: The self-bias voltage η increases monotonically and almost linearly with the increase in the phase angle θ between the two driving voltages in the range 0<θ<90°, and the maximum ion energy varies by a factor of 3 by adjusting θ. However, the ion flux varies with θ by ±12% for low pressure and by ±15% for higher pressure, due primarily to an enhanced plasma series resonance, which then leads to dramatic changes in plasma density, power absorption and consequently the electronegativity. This may place a limitation for achieving separate control of ion energy and flux for electronegative plasma via the EAE.

  2. Numerical simulations of electrical asymmetry effect on electronegative plasmas in capacitively coupled rf discharge

    SciTech Connect

    Zhang Quanzhi; Jiang Wei; Wang Younian; Hou Lujing

    2011-01-01

    Recently a so-called electrical asymmetry effect (EAE), which could achieve high-degree separate control of ion flux and energy in dual-frequency capacitively coupled radio-frequency (CCRF) discharges, was discovered theoretically by Heil et al. [J. Phys. D: Appl. Phys. 41, 165202 (2008)] and was confirmed by experiments and theory/numerical simulations later on for electropositive argon discharges. In this work simulations based on particle-in-cell/Monte Carlo collision are performed to study the EAE on electronegative oxygen plasmas in geometrically symmetric CCRF discharges. Dual frequency discharges operating at 13.56 and 27.12 MHz are simulated for different pressures and the results are compared with those of electropositive argon discharges at the same conditions. It is found that in general the EAE on oxygen discharges has similar behavior as on argon discharge: The self-bias voltage {eta} increases monotonically and almost linearly with the increase in the phase angle {theta} between the two driving voltages in the range 0<{theta}<90 deg. , and the maximum ion energy varies by a factor of 3 by adjusting {theta}. However, the ion flux varies with {theta} by {+-}12% for low pressure and by {+-}15% for higher pressure, due primarily to an enhanced plasma series resonance, which then leads to dramatic changes in plasma density, power absorption and consequently the electronegativity. This may place a limitation for achieving separate control of ion energy and flux for electronegative plasma via the EAE.

  3. High Resolution Studies of the Origins of Polyatomic Ions in Inductively Coupled Plasma-Mass Spectrometry

    SciTech Connect

    Jill Wisnewski Ferguson

    2006-08-09

    The inductively coupled plasma (ICP) is an atmospheric pressure ionization source. Traditionally, the plasma is sampled via a sampler cone. A supersonic jet develops behind the sampler, and this region is pumped down to a pressure of approximately one Torr. A skimmer cone is located inside this zone of silence to transmit ions into the mass spectrometer. The position of the sampler and skimmer cones relative to the initial radiation and normal analytical zones of the plasma is key to optimizing the useful analytical signal [1]. The ICP both atomizes and ionizes the sample. Polyatomic ions form through ion-molecule interactions either in the ICP or during ion extraction [l]. Common polyatomic ions that inhibit analysis include metal oxides (MO{sup +}), adducts with argon, the gas most commonly used to make up the plasma, and hydride species. While high resolution devices can separate many analytes from common interferences, this is done at great cost in ion transmission efficiency--a loss of 99% when using high versus low resolution on the same instrument [2]. Simple quadrupole devices, which make up the bulk of ICP-MS instruments in existence, do not present this option. Therefore, if the source of polyatomic interferences can be determined and then manipulated, this could potentially improve the figures of merit on all ICP-MS devices, not just the high resolution devices often utilized to study polyatomic interferences.

  4. Reversal of the asymmetry in a cylindrical coaxial capacitively coupled Ar/Cl2 plasma

    DOE PAGESBeta

    Upadhyay, Janardan; Im, Do; Popović, Svetozar; Vušković, Leposava; Valente-Feliciano, Anne -Marie; Phillips, Larry

    2015-10-08

    The reduction of the asymmetry in the plasma sheath voltages of a cylindrical coaxial capacitively coupled plasma is crucial for efficient surface modification of the inner surfaces of concave three-dimensional structures, including superconducting radio frequency cavities. One critical asymmetry effect is the negative dc self-bias, formed across the inner electrode plasma sheath due to its lower surface area compared to the outer electrode. The effect on the self-bias potential with the surface enhancement by geometric modification on the inner electrode structure is studied. The shapes of the inner electrodes are chosen as cylindrical tube, large and small pitch bellows, andmore » disc-loaded corrugated structure (DLCS). The dc self-bias measurements for all these shapes were taken at different process parameters in Ar/Cl2 discharge. Lastly, the reversal of the negative dc self-bias potential to become positive for a DLCS inner electrode was observed and the best etch rate is achieved due to the reduction in plasma asymmetry.« less

  5. Modeling of a negative ion source. II. Plasma-gas coupling in the extraction region

    SciTech Connect

    Taccogna, F.; Schneider, R.; Longo, S.; Capitelli, M.

    2008-10-15

    The production, destruction, and transport of H{sup -} in the extraction region of a negative ion source are investigated with a 1D(z)-3V particle-in-cell electrostatic code. The motion of charged particles (e, H{sup +}, H{sub 2}{sup +}, and H{sup -}) in their self-consistent electric field is coupled with the neutral particles [H(n=1) and H{sub 2}(X{sup 1}{sigma}{sub g}{sup +}, v=0,...,14)] dynamics and vibrational kinetics of H{sub 2}. Neutral influxes into the domain are determined by the simulation of the expansion region. Surface and volumetric processes involving plasma and neutrals have been included by using different Monte Carlo collision methods. Calculations show the influence of the plasma grid bias and of the magnetic filter on the plasma parameter profiles. In particular, a transition from classical to complete reverse sheath is observed using a positively biased plasma grid. The influence of the magnetic filter is small. The importance of the hot-atom mechanism on the surface negative ion production is shown.

  6. An inductively coupled plasma source for the Gaseous Electronics Conference RF Reference Cell

    SciTech Connect

    Miller, P.A.; Hebner, G.A.; Greenberg, K.E.; Pochan, P.D.; Aragon, B.P.

    1995-07-01

    In order to extend the operating range of the GEC RF Reference Cell, the authors developed an inductively coupled plasma source that replaced the standard parallel-plate upper-electrode assembly. Voltage and current probes, Langmuir probes, and an 80 GHz interferometer provided information on plasmas formed in argon, chlorine, and nitrogen at pressures from 0.1 Pa to 3 Pa. For powers deposited in the plasma from 20 W to 300 W, the source produced peak electron densities between 10{sup 10}/cm{sup 3} and 10{sup 12}/cm{sup 3} and electron temperatures near 4 eV. The electron density peaked on axis with typical full-width at half maximum of 7 cm to 9 cm. Discharges in chlorine and nitrogen had bimodal operation that was clearly evident from optical emission intensity. A dim mode occurred at low power and a bright mode at high power. The transition between modes had hysteresis. After many hours of high-power operation, films formed on electrodes and walls of one Cell. These deposits affected the dim-to-bright mode transition, and also apparently caused generation of hot electrons and increased the plasma potential.

  7. Mode transition in CF{sub 4} + Ar inductively coupled plasma

    SciTech Connect

    Liu, Wei; Gao, Fei; Zhao, Shu-Xia; Li, Xue-Chun; Wang, You-Nian

    2013-12-15

    The E to H mode transitions are studied by a hairpin probe and optical emission spectroscopy in inductively coupled CF{sub 4} + Ar plasmas. Electron density, optical emission intensity of Ar, and the voltage and current are measured during the E to H mode transitions. It is found that the electron density and plasma emission intensity increase continuously at low pressure during the E to H mode transition, while they jump up discontinuously at high pressure. Meanwhile, the transition threshold power and △P (the power interval between E and H mode) increase by increasing the pressure. When the ratio of CF{sub 4} increases, the E to H mode transition happens at higher applied power, and meanwhile, the △P also significantly increases. Besides, the effects of CF{sub 4} gas ratio on the plasma properties and the circuit electrical properties in both pure E and H modes were also investigated. The electron density and plasma emission intensity both decrease upon increasing the ratio of CF{sub 4} at the two modes, due to the stronger electrons loss scheme. The applied voltages at E and H modes both increase as increasing the CF{sub 4} gas ratio, however the applied current at two modes behave just oppositely with the gas ratio.

  8. Coupling hydrodynamics to nonequilibrium degrees of freedom in strongly interacting quark-gluon plasma.

    PubMed

    Heller, Michal P; Janik, Romuald A; Spaliński, Michał; Witaszczyk, Przemysław

    2014-12-31

    Relativistic hydrodynamics simulations of quark-gluon plasma play a pivotal role in our understanding of heavy ion collisions at RHIC and LHC. They are based on a phenomenological description due to Müller, Israel, Stewart (MIS) and others, which incorporates viscous effects and ensures a well-posed initial value problem. Focusing on the case of conformal plasma we propose a generalization which includes, in addition, the dynamics of the least damped far-from-equilibrium degree of freedom found in strongly coupled plasmas through the AdS/CFT correspondence. We formulate new evolution equations for general flows and then test them in the case of N=4 super Yang-Mills plasma by comparing their solutions alongside solutions of MIS theory with numerical computations of isotropization and boost-invariant flow based on holography. In these tests the new equations reproduce the results of MIS theory when initialized close to the hydrodynamic stage of evolution, but give a more accurate description of the dynamics when initial conditions are set in the preequilibrium regime. PMID:25615302

  9. Rocket experiment in a coupling process between neutral atmosphere and plasma

    NASA Astrophysics Data System (ADS)

    Watanabe, S.; Liu, H.; Abe, T.; Ono, T.; Otsuka, Y.; Saito, A.; Yamamoto, M.; Yamamoto, M. Y.

    Rocket experiment is carried out to investigate a coupling process between neutral atmosphere and plasma of thermosphere and ionosphere at Kagoshima Space Center KSC of JAXA The rocket launch window is in the evening of July 31 - August 15 2007 Momentum transfer through collisional process of the neutral atmosphere and the plasma is a basic problem of atmospheric circulation and super rotation in the low latitude thermosphere and a medium scale traveling ionospheric disturbance MS-TID occurring in the mid-latitude ionosphere but the direct observation is not yet performed In the rocket experiment we observe plasma drift velocity plasma density and temperature and its fluctuations electric field magnetic field and neutral wind The neutral winds are estimated from the movements of Lithium clouds which are released at altitudes between 150km and 300km and scatter sunlight by resonance scattering with wavelength of 670 nm The Lithium clouds are observed by CCD imagers on ground The plan of rocket experiment ground observation system and science objectives are presented

  10. Collaborative project: research on strongly coupled plasmas. Final technical report for period July 15, 1998--July 14, 2002

    SciTech Connect

    Golden, Kenneth I.

    2002-09-16

    The main research accomplishments/findings of the project were the following: (1) Publication of an in-depth review article in Physics of Plasmas on the quasilocalized charge approximation (QLCA) in strongly coupled plasma physics and its application to a variety of Coulomb systems: the model one-component plasma in three and two dimensions, binary ionic mixtures, charged particle bilayers, and laboratory dusty plasmas. (2) In the strongly coupled Coulomb liquid phase, the physical basis of the QLCA, namely, the caging of particles trapped in slowly fluctuating local potential minima, is supported by molecular dynamics simulation of the classical three-dimensional one-component plasma. (3) The QLCA theory, when applied to the analysis of the collective modes in strongly coupled charged particle bilayers, predicts the existence of a remarkable long-wavelength energy gap in the out-of-phase excitation spectrum. More recent theoretical calculations based on the three principal frequency-moment sum rules reveal that the gap persists for arbitrary coupling strengths and over the entire classical to quantum domain all the way down to zero temperature. The existence of the energy gap has now been confirmed in a molecular dynamics simulation of the charged particle bilayer. (4) New compressibility and third-frequency-moment sum rules for multilayer plasmas were formulated and applied to the analysis of the dynamical structure function of charged particle bilayers and superlattices. (5) An equivalent of the Debye-Huckel weak coupling equilibrium theory for classical charged particle bilayer and superlattice plasmas was formulated. (6) The quadratic fluctuation-dissipation theorem (QFDT) for layered classical plasmas was formulated. (7) The QFDT was applied to a powerful kinetic theory-based description of the density-density response function and long-wavelength plasma mode behavior in strongly coupled two-dimensional Coulomb fluids in the weakly degenerate quantum domain.

  11. E→H mode transition density and power in two types of inductively coupled plasma configuration

    SciTech Connect

    Wang, Jian; Du, Yin-chang; Zhang, Xiao; Zheng, Zhe; Liu, Yu; Xu, Liang; Wang, Pi; Cao, Jin-xiang

    2014-07-15

    E → H transition power and density were investigated at various argon pressures in inductively coupled plasma (ICP) in a cylindrical interlaid chamber. The transition power versus the pressure shows a minimum transition power at 4 Pa (ν/ω=1) for argon. Then the transition density hardly changes at low pressures (ν/ω≪1), but it increases clearly when argon pressure exceeds an appropriate value. In addition, both the transition power and transition density are lower in the re-entrant configuration of ICP compared with that in the cylindrical configuration of ICP. The result may be caused from the decrease of stochastic heating in the re-entrant configuration of ICP. This work is useful to understand E → H mode transition and control the transition points in real plasma processes.

  12. Coupling and ionization effects on hydrogen spectral line shapes in dense plasmas

    NASA Astrophysics Data System (ADS)

    Calisti, A.; Bureyeva, L. A.; Lisitsa, V. S.; Shuvaev, D.; Talin, B.

    2007-06-01

    A study of hydrogen lines emitted in dense and low temperature plasmas is presented. Coupling and ionization effects in a transition from impact to quasi-static broadening for electrons are analyzed with the help of the Frequency Fluctuation Model (FFM). Electron broadening of Balmer series lines is studied for different densities and temperatures spanning a wide domain from impact to quasi-static limit. It is shown that electronic broadening makes a transition from impact to quasi-static limit depending on plasma conditions and principal quantum number. Even for the Balmer alpha line, at a density equals 1018 cm-3 and a temperature equals 1 eV, this transition occurs both in the wings and the core of the line.

  13. Low-frequency, self-sustained oscillations in inductively coupled plasmas used for optical pumping

    SciTech Connect

    Coffer, J.; Encalada, N.; Huang, M.; Camparo, J.

    2014-10-28

    We have investigated very low frequency, on the order of one hertz, self-pulsing in alkali-metal inductively-coupled plasmas (i.e., rf-discharge lamps). This self-pulsing has the potential to significantly vary signal-to-noise ratios and (via the ac-Stark shift) resonant frequencies in optically pumped atomic clocks and magnetometers (e.g., the atomic clocks now flying on GPS and Galileo global navigation system satellites). The phenomenon arises from a nonlinear interaction between the atomic physics of radiation trapping and the plasma's electrical nature. To explain the effect, we have developed an evaporation/condensation theory (EC theory) of the self-pulsing phenomenon.

  14. {lambda}{sub c} Enhancement from Strongly Coupled Quark-Gluon Plasma

    SciTech Connect

    Lee, Su Houng; Ohnishi, Kazuaki; Yasui, Shigehiro; Yoo, In-Kwon; Ko, Che Ming

    2008-06-06

    We propose the enhancement of {lambda}{sub c} as a novel quark-gluon plasma signal in heavy ion collisions at the BNL Relativistic Heavy Ion Collider and the CERN Large Hadron Collider. Assuming a stable bound diquark state in the strongly coupled quark-gluon plasma near the critical temperature, we argue that the direct two-body collision between a c quark and a [ud] diquark would lead to an enhanced {lambda}{sub c} production in comparison with the normal three-body collision among independent c, u, and d quarks. In the coalescence model, we find that the {lambda}{sub c}/D yield ratio is enhanced substantially due to the diquark correlation.

  15. Dynamics of positronium formation in positron-hydrogen collisions embedded in weakly coupled plasmas

    NASA Astrophysics Data System (ADS)

    Nayek, Sujay; Ghoshal, Arijit

    2012-11-01

    Dynamics of positronium (Ps) formation in an arbitrary s-state from an arbitrary s-state of the hydrogen atom in weakly coupled plasma has been investigated within the framework of a distorted-wave theory. The interactions among the charged particles in the plasma have been represented by Debye-Huckel potentials. Using simple variational hydrogenic wave functions and arbitrary order derivatives of the general three-denominator Lewis integral partial-wave scattering amplitudes have been obtained in closed forms. These distorted-wave scattering amplitudes have been used to make a detailed study on differential and total cross sections. It has been found that screening of the interaction potentials has significant effect on the scattering dynamics. Some notable features of cross sections have also been revealed.

  16. [Plasma temperature calculation and coupling mechanism analysis of laser-double wire hybrid welding].

    PubMed

    Zheng, Kai; Li, Huan; Yang, Li-Jun; Gu, Xiao-Yan; Gao, Ying

    2013-04-01

    The plasma radiation of laser-double wire hybrid welding was collected by using fiber spectrometer, the coupling mechanism of arc with laser was studied through high-speed photography during welding process, and the temperature of hybrid plasma was calculated by using the method of Boltzmann plot. The results indicated that with laser hybrid, luminance was enhanced; radiation intensity became stronger; arc was attracted to the laser point; cross section contracted and arc was more stable. The laser power, welding current and arc-arc distance are important factors that have great influence on electron temperature. Increase in the laser power, amplification of welding current and reduction of arc-arc distance can all result in the rise of temperature. PMID:23841392

  17. Kinetic simulation of capacitively coupled plasmas driven by trapezoidal asymmetric voltage pulses

    SciTech Connect

    Diomede, Paola Economou, Demetre J.

    2014-06-21

    A kinetic Particle-In-Cell simulation with Monte Carlo Collisions was performed of a geometrically symmetric capacitively coupled, parallel-plate discharge in argon, driven by trapezoidal asymmetric voltage pulses with a period of 200 ns. The discharge was electrically asymmetric, making the ion energy distributions at the two electrodes different from one another. The fraction of the period (α), during which the voltage was kept at a constant (top-flat) positive value, was a critical control parameter. For the parameter range investigated, as α increased, the mean ion energy on the grounded electrode increased and the ions became more directional, whereas the opposite was found for the ions striking the powered electrode. The absolute value of the DC self-bias voltage decreased as α increased. Plasma instabilities, promoted by local double layers and electric field reversals during the time of the positive voltage excursion, were characterized by electron plasma waves launched from the sheath edge.

  18. Kinetic simulation of capacitively coupled plasmas driven by trapezoidal asymmetric voltage pulses

    NASA Astrophysics Data System (ADS)

    Diomede, Paola; Economou, Demetre J.

    2014-06-01

    A kinetic Particle-In-Cell simulation with Monte Carlo Collisions was performed of a geometrically symmetric capacitively coupled, parallel-plate discharge in argon, driven by trapezoidal asymmetric voltage pulses with a period of 200 ns. The discharge was electrically asymmetric, making the ion energy distributions at the two electrodes different from one another. The fraction of the period (α), during which the voltage was kept at a constant (top-flat) positive value, was a critical control parameter. For the parameter range investigated, as α increased, the mean ion energy on the grounded electrode increased and the ions became more directional, whereas the opposite was found for the ions striking the powered electrode. The absolute value of the DC self-bias voltage decreased as α increased. Plasma instabilities, promoted by local double layers and electric field reversals during the time of the positive voltage excursion, were characterized by electron plasma waves launched from the sheath edge.

  19. Nondispersive X-ray spectroscopy and imaging of plasmas using a charge-coupled device

    NASA Technical Reports Server (NTRS)

    Marsh, K.; Joshi, C.; Janesick, J.; Collins, S.

    1985-01-01

    A virtual-phase charge-coupled device (CCD) was used to obtain pinhole images and X-ray spectra of laser-produced, solid target plasmas. With the CCD used in the single-photon counting mode, the spectrum in the energy range 2-10 keV was obtained without a dispersive element. Typical spectra reveal two distinct temperatures: a cold component of approximately 200 eV and a hot component of approximately 5 keV. Also, multiline spectra comprising characteristic line emission (K alpha, K beta) from a multilayer target bombarded by beta-rays were recorded using a three-phase CCD. The results demonstrate the potential of CCDs as imaging spectrometers with application in space, laboratory, and fusion-plasma research.

  20. Expressing self-absorption in the analytical function of inductively coupled plasma atomic emission spectrometry

    NASA Astrophysics Data System (ADS)

    Kántor, Tibor; Bartha, András

    2015-11-01

    The self-absorption of spectral lines was studied with up to date multi-element inductively coupled plasma atomic emission spectrometry (ICP-AES) instrumentation using radial and axial viewing of the plasma, as well, performing line peak height and line peak area measurements. Two resonance atomic and ionic lines of Cd and Mg were studied, the concentration range was extended up to 2000 mg/L. At the varying analyte concentration, constant matrix concentration of 10,000 mg/L Ca was ensured in the pneumatically nebulized solutions. The physical and the phenomenological formulation of the emission analytical function is overviewed and as the continuity of the earlier results the following equation is offered: