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Sample records for n-well cmos process

  1. Recent progress in the development of 3D deep n-well CMOS MAPS

    NASA Astrophysics Data System (ADS)

    Traversi, G.; Gaioni, L.; Manazza, A.; Manghisoni, M.; Ratti, L.; Re, V.; Zucca, S.

    2012-02-01

    In the deep n-well (DNW) monolithic active pixel sensor (MAPS) a full in-pixel signal processing chain is integrated by exploiting the triple well option of a deep submicron CMOS process. This work is concerned with the design and characterization of DNW MAPS fabricated in a vertical integration (3D) CMOS technology. 3D processes can be very effective in overcoming typical limitations of monolithic active pixel sensors. This paper discusses the main features of a new analog processor for DNW MAPS (ApselVI) in view of applications to the SVT Layer0 of the SuperB Factory. It also presents the first experimental results from the test of a DNW MAPS prototype in the GlobalFoundries 130 nm CMOS technology.

  2. The first fully functional 3D CMOS chip with Deep N-well active pixel sensors for the ILC vertex detector

    NASA Astrophysics Data System (ADS)

    Traversi, G.; Gaioni, L.; Manazza, A.; Manghisoni, M.; Ratti, L.; Re, V.

    2013-12-01

    This work presents the characterization of Deep N-well (DNW) active pixel sensors fabricated in a vertically integrated technology. The DNW approach takes advantage of the triple well structure to lay out a sensor with relatively large charge collecting area (as compared to standard three transistor MAPS), while the readout is performed by a classical signal processing chain for capacitive detectors. This new 3D design relies upon stacking two homogeneous tiers fabricated in a 130 nm CMOS process where the top tier is thinned down to about 12 ?m to expose through silicon vias (TSV), therefore making connection to the buried circuits possible. This technology has been used to design a fine pitch 3D CMOS sensor with sparsification capabilities, in view of vertexing applications to the International Linear Collider (ILC) experiments. Results from the characterization of different kind of test structures, including single pixels, 33 and 88 matrices, are presented.

  3. Characteristics of Various Photodiode Structures in CMOS Technology with Monolithic Signal Processing Electronics

    SciTech Connect

    Mukhopadhyay, Sourav; Chandratre, V. B.; Sukhwani, Menka; Pithawa, C. K.

    2011-10-20

    Monolithic optical sensor with readout electronics are needed in optical communication, medical imaging and scintillator based gamma spectroscopy system. This paper presents the design of three different CMOS photodiode test structures and two readout channels in a commercial CMOS technology catering to the need of nuclear instrumentation. The three photodiode structures each of 1 mm{sup 2} with readout electronics are fabricated in 0.35 um, 4 metal, double poly, N-well CMOS process. These photodiode structures are based on available P-N junction of standard CMOS process i.e. N-well/P-substrate, P+/N-well/P-substrate and inter-digitized P+/N-well/P-substrate. The comparisons of typical characteristics among three fabricated photo sensors are reported in terms of spectral sensitivity, dark current and junction capacitance. Among the three photodiode structures N-well/P-substrate photodiode shows higher spectral sensitivity compared to the other two photodiode structures. The inter-digitized P+/N-well/P-substrate structure has enhanced blue response compared to N-well/P-substrate and P+/N-well/P-substrate photodiode. Design and test results of monolithic readout electronics, for three different CMOS photodiode structures for application related to nuclear instrumentation, are also reported.

  4. End-of-fabrication CMOS process monitor

    NASA Technical Reports Server (NTRS)

    Buehler, M. G.; Allen, R. A.; Blaes, B. R.; Hannaman, D. J.; Lieneweg, U.; Lin, Y.-S.; Sayah, H. R.

    1990-01-01

    A set of test 'modules' for verifying the quality of a complementary metal oxide semiconductor (CMOS) process at the end of the wafer fabrication is documented. By electrical testing of specific structures, over thirty parameters are collected characterizing interconnects, dielectrics, contacts, transistors, and inverters. Each test module contains a specification of its purpose, the layout of the test structure, the test procedures, the data reduction algorithms, and exemplary results obtained from 3-, 2-, or 1.6-micrometer CMOS/bulk processes. The document is intended to establish standard process qualification procedures for Application Specific Integrated Circuits (ASIC's).

  5. A Standard CMOS Humidity Sensor without Post-Processing

    PubMed Central

    Nizhnik, Oleg; Higuchi, Kohei; Maenaka, Kazusuke

    2011-01-01

    A 2 ?W power dissipation, voltage-output, humidity sensor accurate to 5% relative humidity was developed using the LFoundry 0.15 ?m CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a Intervia Photodielectric 802310 humidity-sensitive layer, and a CMOS capacitance to voltage converter. PMID:22163949

  6. The effect of layout topology on single-event transient pulse quenching in a 65 nm bulk CMOS process.

    SciTech Connect

    Ball, D. R.; Ahlbin, Jonathan R.; Gadlage, Matthew J.; Massengill, Lloyd W.; Witulski, A. W.; Reed, R. A.; Vizkelethy, Gyorgy; Bhuva, Bharat L.

    2010-07-01

    Heavy-ion microbeam and broadbeam data are presented for a 65 nm bulk CMOS process showing the existence of pulse quenching at normal and angular incidence for designs where the pMOS transistors are in common n-wells or isolated in separate n-wells. Experimental data and simulations show that pulse quenching is more prevalent in the common n-well design than the separate n-well design, leading to significantly reduced SET pulsewidths and SET cross-section in the common n-well design.

  7. Industrial microsystems on top of CMOS design and process

    NASA Astrophysics Data System (ADS)

    Carrabina, Jordi; Saiz, Joaquin; Marin, David; Marin, Xavier; Merlos, Angel; Bausells, Joan

    1996-09-01

    We propose a design and technology methodology and CAD tools for a microsystems fabrication based on the 1.0 micrometers CMOS from ATMEL-ES2. In order to profit from vendor cell libraries, design kits have to be enhanced to deal with the new conception environment. Main contributions are, sensor dependent technology file, device modeling and automatic generation for different ranges, and adaptation of semi- custom tools (simulation environment and P and R) for complete microsystems design. A library of dedicated sensor cells is being designed using Cadence DFWII and the foundry design kit. These sensors are fabricated with the standard CMOS process plus some post-processing steps. Three levels of post-processing are considered: 1) pH-ISFET sensors fabricated using standard CMOS, 2) gas flow and radiation sensors based on thermopiles using simple post-processing. The post-processing is compatible with the foundry CMOS process. Our technology has been developed up tot he point of maximum simplification that results in the use of only one additional mask for back-side etching. Passivation layer together with oxide windows are used for front-side etching with excellent results.

  8. IGBT scaling principle toward CMOS compatible wafer processes

    NASA Astrophysics Data System (ADS)

    Tanaka, Masahiro; Omura, Ichiro

    2013-02-01

    A scaling principle for trench gate IGBT is proposed. CMOS technology on large diameter wafer enables to produce various digital circuits with higher performance and lower cost. The transistor cell structure becomes laterally smaller and smaller and vertically shallower and shallower. In contrast, latest IGBTs have rather deeper trench structure to obtain lower on-state voltage drop and turn-off loss. In the aspect of the process uniformity and wafer warpage, manufacturing such structure in the CMOS factory is difficult. In this paper, we show the scaling principle toward shallower structure and better performance. The principle is theoretically explained by our previously proposed "Structure Oriented" analytical model. The principle represents a possibility of technology direction and roadmap for future IGBT for improving the device performance consistent with lower cost and high volume productivity with CMOS compatible large diameter wafer technologies.

  9. Quantification of Shallow-junction Dopant Loss during CMOS Process

    SciTech Connect

    Buh, G.H.; Park, T.; Jee, Y.; Hong, S.J.; Ryoo, C.; Yoo, J.; Lee, J.W.; Yon, G.H.; Jun, C.S.; Shin, Y.G.; Chung, U.-In; Moon, J.T.

    2005-09-09

    We analyzed dopant concentration and profiles in source drain extension (SDE) by using in-line low energy electron induced x-ray emission spectrometry (LEXES), four point probe (FPP), and secondary ion mass spectroscopy (SIMS). By monitoring the dopant dose with LEXES, dopant loss in implantation and annealing process was successfully quantified. To measure the actual SDE sheet resistance in CMOS device structure without probe penetration in FPP, we fabricated a simple SDE sheet-resistance test structure (SSTS) by modifying a conventional CMOS process. It was found that the sheet resistances determined with SSTS are larger than those measured with FPP. There are three mechanisms of dopants loss in CMOS process: 1) wet-etching removal during photo resist cleaning, 2) out-diffusion, and 3) deactivation by post-thermal process. We quantified the loss of the dopant in SDE during the CMOS process, and found that the wet-etching removal and out-diffusion are the most significant causes for dopant loss in n-SDE and p-SDE, respectively.

  10. A CCD/CMOS process for integrated image acquisition and early vision signal processing

    NASA Astrophysics Data System (ADS)

    Keast, Craig L.; Sodini, Charles G.

    The development of technology which integrates a four phase, buried-channel CCD in an existing 1.75 micron CMOS process is described. The four phase clock is employed in the integrated early vision system to minimize process complexity. Signal corruption is minimized and lateral fringing fields are enhanced by burying the channel. The CMOS process for CCD enhancement is described, which highlights a new double-poly process and the buried channel, and the integration is outlined. The functionality and transfer efficiency of the process enhancement were appraised by measuring CCD shift registers at 100 kHz. CMOS measurement results are presented, which include threshold voltages, poly-to-poly capacitor voltage and temperature coefficients, and dark current. A CCD/CMOS processor is described which combines smoothing and segmentation operations. The integration of the CCD and the CMOS processes is found to function due to the enhancement-compatible design of the CMOS process and the thorough employment of CCD module baseline process steps.

  11. Logic compatible process technology for embedded atom switches in CMOS

    NASA Astrophysics Data System (ADS)

    Okamoto, Koichiro; Tada, Munehiro; Banno, Naoki; Iguchi, Noriyuki; Sakamoto, Toshitsugu; Hada, Hiromitsu

    2015-05-01

    We have developed a CMOS logic compatible process for embedding Cu atom switches in a Cu/low-k back-end-of-line without degrading interconnect and switch performance characteristics. The key technologies are (i) burying a via-interlayer dielectric layer between the switches without voids, followed by surface planarization using chemical mechanical polishing, and (ii) introducing a Ta protective second top electrode, which realizes simultaneous via-openings to both the switches and the lower interconnects without degrading physical morphology and electric properties of the switches. The developed process enables us to integrate the atom switches on logic with only two additional masks at low cost.

  12. PIN photodiode bandwidth optimization in integrated CMOS process

    NASA Astrophysics Data System (ADS)

    Fang, Fred; Franke, Matthias; Gaebler, Daniel; Sang Sool, Koo

    2011-05-01

    Silicon photodiode integrated with CMOS has been in extensive study for the past ten years due to its wide use in applications such as short-distance communication, VCD players, ambient light sensors and many other intelligent systems. In recent years, high speed blue-ray DVD is replacing conventional DVD due to its larger storage capacity and higher speed. In this work, the photodiode optimized for blue ray is fully integrated with standard 0.35um CMOS process and the bandwidth dependency upon thermal process and epitaxial material is investigated. It was found that the additional substrate thermal process can improve bandwidth for blue and red light but reduce bandwidth for infra-red. It is also found that higher level p-type epi doping does not impact bandwidth for blue light but reduces bandwidth for red and infra-red. The various mechanisms of bandwidth were discussed based on the experimental results. It indicated that the bandwidth of photodiodes depends on photo carriers travel time which can be explained by simple model of drift transport and diffusion transport. The design of photodiode should optimize the depletion region and reduce the carrier travel time.

  13. Interferometric metrology of wafer nanotopography for advanced CMOS process integration

    NASA Astrophysics Data System (ADS)

    Valley, John F.; Koliopoulos, Chris L.; Tang, Shouhong

    2001-12-01

    According to industry standards (SEMI M43, Guide for Reporting Wafer Nanotopography), Nanotopography is the non- planar deviation of the whole front wafer surface within a spatial wavelength range of approximately 0.2 to 20 mm and within the fixed quality area (FQA). The need for precision metrology of wafer nanotopography is being actively addressed by interferometric technology. In this paper we present an approach to mapping the whole wafer front surface nanotopography using an engineered coherence interferometer. The interferometer acquires a whole wafer raw topography map. The raw map is then filtered to remove the long spatial wavelength, high amplitude shape contributions and reveal the nanotopography in the filtered map. Filtered maps can be quantitatively analyzed in a variety of ways to enable statistical process control (SPC) of nanotopography parameters. The importance of tracking these parameters for CMOS gate level processes at 180-nm critical dimension, and below, is examined.

  14. Development of a radiation-hard CMOS process

    NASA Technical Reports Server (NTRS)

    Power, W. L.

    1983-01-01

    It is recommended that various techniques be investigated which appear to have the potential for improving the radiation hardness of CMOS devices for prolonged space flight mission. The three key recommended processing techniques are: (1) making the gate oxide thin. It has been shown that radiation degradation is proportional to the cube of oxide thickness so that a relatively small reduction in thickness can greatly improve radiation resistance; (2) cleanliness and contamination control; and (3) to investigate different oxide growth (low temperature dry, TCE and HCL). All three produce high quality clean oxides, which are more radiation tolerant. Technique 2 addresses the reduction of metallic contamination. Technique 3 will produce a higher quality oxide by using slow growth rate conditions, and will minimize the effects of any residual sodium contamination through the introduction of hydrogen and chlorine into the oxide during growth.

  15. A low temperature fabrication process utilizing FIB implantation for CMOS compatible photovoltaic cells

    NASA Astrophysics Data System (ADS)

    Patel, Jasbir N.; Landrock, Clinton; Omrane, Badr; Kaminska, Bozena; Gray, Bonnie L.

    2010-06-01

    In this article, we present a novel low temperature fabrication process using focused ion beam (FIB) for CMOS compatible photovoltaic cells. Photovoltaic cells are used for scavenging light energy to power CMOS devices and integrating photovoltaic cells on the same CMOS die for self-powering integrated circuits is highly desirable. Integrating such photovoltaic cells as a post-process of the pre-fabricated CMOS die will avoid many complex assembling steps as well as unpredictable interconnect problems. To demonstrate the proof of concept, we have developed low temperature fabrication process to avoid damage to the pre-fabricated CMOS dies. We are also going to introduce focused-ion beam (FIB) as an implantation source to dope silicon wafer for desired concentration. The successfully fabricated demonstration device is tested using a solar simulator. The results obtained from the experimental data indicate that the demonstration device works perfectly as a photovoltaic cell rather with very low efficiency (0.004%).

  16. Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process.

    PubMed

    Dai, Ching-Liang; Lu, Po-Wei; Wu, Chyan-Chyi; Chang, Chienliu

    2009-01-01

    In this study, we fabricated a wireless micro FET (field effect transistor) pressure sensor based on the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The wireless micro pressure sensor is composed of a FET pressure sensor, an oscillator, an amplifier and an antenna. The oscillator is adopted to generate an ac signal, and the amplifier is used to amplify the sensing signal of the pressure sensor. The antenna is utilized to transmit the output voltage of the pressure sensor to a receiver. The pressure sensor is constructed by 16 sensing cells in parallel. Each sensing cell contains an MOS (metal oxide semiconductor) and a suspended membrane, which the gate of the MOS is the suspended membrane. The post-process employs etchants to etch the sacrificial layers in the pressure sensor for releasing the suspended membranes, and a LPCVD (low pressure chemical vapor deposition) parylene is adopted to seal the etch holes in the pressure. Experimental results show that the pressure sensor has a sensitivity of 0.08 mV/kPa in the pressure range of 0-500 kPa and a wireless transmission distance of 10 cm. PMID:22291534

  17. Monolithic integration of high bandwidth waveguide coupled Ge photodiode in a photonic BiCMOS process

    NASA Astrophysics Data System (ADS)

    Lischke, S.; Knoll, D.; Zimmermann, L.

    2015-03-01

    Monolithic integration of photonic functionality in the frontend-of-line (FEOL) of an advanced microelectronics technology is a key step towards future communication applications. This combines photonic components such as waveguides, couplers, modulators, and photo detectors with high-speed electronics plus shortest possible interconnects crucial for high-speed performance. Integration of photonics into CMOS FEOL is therefore in development for quite some time reaching 90nm node recently [1]. However, an alternative to CMOS is high-performance BiCMOS, offering significant advantages for integrated photonics-electronics applications with regard to cost and RF performance. We already presented results of FEOL integration of photonic components in a high-performance SiGe:C BiCMOS baseline to establish a novel, photonic BiCMOS process. Process cornerstone is a local-SOI approach which allows us to fabricate SOI-based, thus low-loss photonic components in a bulk BiCMOS environment [2]. A monolithically integrated 10Gbit/sec Silicon modulator with driver was shown here [3]. A monolithically integrated 25Gbps receiver was presented in [4], consisting of 200GHz bipolar transistors and CMOS devices, low-loss waveguides, couplers, and highspeed Ge photo diodes showing 3-dB bandwidth of 35GHz, internal responsivity of more than 0.6A/W at λ= 1.55μm, and ~ 50nA dark current at 1V. However, the BiCMOS-given thermal steps cause a significant smearing of the Germanium photo diodes doping profile, limiting the photo diode performance. Therefore, we introduced implantation of non-doping elements to overcome such limiting factors, resulting in photo diode bandwidths of more than 50GHz even under the effect of thermal steps necessary when the diodes are integrated in a high performance BiCMOS process.

  18. A modular process for integrating thick polysilicon MEMS devices with sub-micron CMOS

    NASA Astrophysics Data System (ADS)

    Yasaitis, John A.; Judy, Michael; Brosnihan, Tim; Garone, Peter M.; Pokrovskiy, Nikolay; Sniderman, Debbie; Limb, Scott; Howe, Roger T.; Boser, Bernhard E.; Palaniapan, Moorthi; Jiang, Xuesong; Bhave, Sunil

    2003-01-01

    A new MEMS process module, called Mod MEMS, has been developed to monolithically integrate thick (5-10um), multilayer polysilicon MEMS structures with sub-micron CMOS. This process is particularly useful for advanced inertial MEMS products such as automotive airbag accelerometers where reduced cost and increased functionality is required, or low cost, high performance gyroscopes where thick polysilicon (>6um) and CMOS integration is required to increase poly mass and stiffness, and reduce electrical parasitics in order to optimize angular rate sensing. In this paper we will describe the new modular process flow, development of the critical unit process steps, integration of the module with a foundry sub-micron CMOS process, and provide test data on several inertial designs fabricated with this process.

  19. Post-CMOS chip-level processing for high-aspect-ratio microprobe fabrication utilizing pulse plating

    NASA Astrophysics Data System (ADS)

    Xin, Tinghui; Ajmera, Pratul K.; Zhang, Chuang; Srivastava, Ashok

    2005-05-01

    A post-CMOS process for chip-level monolithic integration has been developed. A metal probe array for recording neural signals is utilized as a test vehicle to realize the integration process. This probe array is fabricated on a 2 mm x 2 mm chip containing eight ultra-low power CMOS operational amplifiers. A LIGA-like process is employed utilizing UV lithography on SU-8 photoresist and pulse electroplating technique. Pulse plating significantly reduces stress in the deposited material. The post-CMOS fabrication process is utilized to fabricate 70 ?m high probes having different aspect-ratios that are monolithically integrated on the CMOS chip.

  20. Overview of CMOS process and design options for image sensor dedicated to space applications

    NASA Astrophysics Data System (ADS)

    Martin-Gonthier, P.; Magnan, P.; Corbiere, F.

    2005-10-01

    With the growth of huge volume markets (mobile phones, digital cameras...) CMOS technologies for image sensor improve significantly. New process flows appear in order to optimize some parameters such as quantum efficiency, dark current, and conversion gain. Space applications can of course benefit from these improvements. To illustrate this evolution, this paper reports results from three technologies that have been evaluated with test vehicles composed of several sub arrays designed with some space applications as target. These three technologies are CMOS standard, improved and sensor optimized process in 0.35?m generation. Measurements are focussed on quantum efficiency, dark current, conversion gain and noise. Other measurements such as Modulation Transfer Function (MTF) and crosstalk are depicted in [1]. A comparison between results has been done and three categories of CMOS process for image sensors have been listed. Radiation tolerance has been also studied for the CMOS improved process in the way of hardening the imager by design. Results at 4, 15, 25 and 50 krad prove a good ionizing dose radiation tolerance applying specific techniques.

  1. Efficient smart CMOS camera based on FPGAs oriented to embedded image processing.

    PubMed

    Bravo, Ignacio; Balias, Javier; Gardel, Alfredo; Lzaro, Jos L; Espinosa, Felipe; Garca, Jorge

    2011-01-01

    This article describes an image processing system based on an intelligent ad-hoc camera, whose two principle elements are a high speed 1.2 megapixel Complementary Metal Oxide Semiconductor (CMOS) sensor and a Field Programmable Gate Array (FPGA). The latter is used to control the various sensor parameter configurations and, where desired, to receive and process the images captured by the CMOS sensor. The flexibility and versatility offered by the new FPGA families makes it possible to incorporate microprocessors into these reconfigurable devices, and these are normally used for highly sequential tasks unsuitable for parallelization in hardware. For the present study, we used a Xilinx XC4VFX12 FPGA, which contains an internal Power PC (PPC) microprocessor. In turn, this contains a standalone system which manages the FPGA image processing hardware and endows the system with multiple software options for processing the images captured by the CMOS sensor. The system also incorporates an Ethernet channel for sending processed and unprocessed images from the FPGA to a remote node. Consequently, it is possible to visualize and configure system operation and captured and/or processed images remotely. PMID:22163739

  2. Efficient Smart CMOS Camera Based on FPGAs Oriented to Embedded Image Processing

    PubMed Central

    Bravo, Ignacio; Baliñas, Javier; Gardel, Alfredo; Lázaro, José L.; Espinosa, Felipe; García, Jorge

    2011-01-01

    This article describes an image processing system based on an intelligent ad-hoc camera, whose two principle elements are a high speed 1.2 megapixel Complementary Metal Oxide Semiconductor (CMOS) sensor and a Field Programmable Gate Array (FPGA). The latter is used to control the various sensor parameter configurations and, where desired, to receive and process the images captured by the CMOS sensor. The flexibility and versatility offered by the new FPGA families makes it possible to incorporate microprocessors into these reconfigurable devices, and these are normally used for highly sequential tasks unsuitable for parallelization in hardware. For the present study, we used a Xilinx XC4VFX12 FPGA, which contains an internal Power PC (PPC) microprocessor. In turn, this contains a standalone system which manages the FPGA image processing hardware and endows the system with multiple software options for processing the images captured by the CMOS sensor. The system also incorporates an Ethernet channel for sending processed and unprocessed images from the FPGA to a remote node. Consequently, it is possible to visualize and configure system operation and captured and/or processed images remotely. PMID:22163739

  3. Respiration detection chip with integrated temperature-insensitive MEMS sensors and CMOS signal processing circuits.

    PubMed

    Wei, Chia-Ling; Lin, Yu-Chen; Chen, Tse-An; Lin, Ren-Yi; Liu, Tin-Hao

    2015-02-01

    An airflow sensing chip, which integrates MEMS sensors with their CMOS signal processing circuits into a single chip, is proposed for respiration detection. Three micro-cantilever-based airflow sensors were designed and fabricated using a 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Two main differences were present among these three designs: they were either metal-covered or metal-free structures, and had either bridge-type or fixed-type reference resistors. The performances of these sensors were measured and compared, including temperature sensitivity and airflow sensitivity. Based on the measured results, the metal-free structure with fixed-type reference resistors is recommended for use, because it has the highest airflow sensitivity and also can effectively reduce the output voltage drift caused by temperature change. PMID:24956395

  4. Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array

    PubMed Central

    Lpez-Huerta, Francisco; Herrera-May, Agustn L.; Estrada-Lpez, Johan J.; Zuiga-Islas, Carlos; Cervantes-Sanchez, Blanca; Soto, Enrique; Soto-Cruz, Blanca S.

    2011-01-01

    We present an alternative post-processing on a CMOS chip to release a planar microelectrode array (pMEA) integrated with its signal readout circuit, which can be used for monitoring the neuronal activity of vestibular ganglion neurons in newborn Wistar strain rats. This chip is fabricated through a 0.6 ?m CMOS standard process and it has 12 pMEA through a 4 3 electrodes matrix. The alternative CMOS post-process includes the development of masks to protect the readout circuit and the power supply pads. A wet etching process eliminates the aluminum located on the surface of the p+-type silicon. This silicon is used as transducer for recording the neuronal activity and as interface between the readout circuit and neurons. The readout circuit is composed of an amplifier and tunable bandpass filter, which is placed on a 0.015 mm2 silicon area. The tunable bandpass filter has a bandwidth of 98 kHz and a common mode rejection ratio (CMRR) of 87 dB. These characteristics of the readout circuit are appropriate for neuronal recording applications. PMID:22346681

  5. Parallel-Processing CMOS Circuitry for M-QAM and 8PSK TCM

    NASA Technical Reports Server (NTRS)

    Gray, Andrew; Lee, Dennis; Hoy, Scott; Fisher, Dave; Fong, Wai; Ghuman, Parminder

    2009-01-01

    There has been some additional development of parts reported in "Multi-Modulator for Bandwidth-Efficient Communication" (NPO-40807), NASA Tech Briefs, Vol. 32, No. 6 (June 2009), page 34. The focus was on 1) The generation of M-order quadrature amplitude modulation (M-QAM) and octonary-phase-shift-keying, trellis-coded modulation (8PSK TCM), 2) The use of square-root raised-cosine pulse-shaping filters, 3) A parallel-processing architecture that enables low-speed [complementary metal oxide/semiconductor (CMOS)] circuitry to perform the coding, modulation, and pulse-shaping computations at a high rate; and 4) Implementation of the architecture in a CMOS field-programmable gate array.

  6. High-speed bipolar phototransistors in a 180nm CMOS process

    PubMed Central

    Kostov, P.; Gaberl, W.; Zimmermann, H.

    2013-01-01

    Several high-speed pnp phototransistors built in a standard 180nm CMOS process are presented. The phototransistors were implemented in sizes of 4040?m2 and 100100?m2. Different base and emitter areas lead to different characteristics of the phototransistors. As starting material a p+ wafer with a p? epitaxial layer on top was used. The phototransistors were optically characterized at wavelengths of 410, 675 and 850nm. Bandwidths up to 92MHz and dynamic responsivities up to 2.95A/W were achieved. Evaluating the results, we can say that the presented phototransistors are well suited for high speed photosensitive optical applications where inherent amplification is needed. Further on, the standard silicon CMOS implementation opens the possibility for cheap integration of integrated optoelectronic circuits. Possible applications for the presented phototransistors are low cost high speed image sensors, opto-couplers, etc. PMID:23847388

  7. Lithography with infrared illumination alignment for advanced BiCMOS backside processing

    NASA Astrophysics Data System (ADS)

    Kulse, P.; Schulz, K.; Behrendt, U.; Wietstruck, M.; Kaynak, M.; Marschmeyer, S.; Tillack, B.

    2014-10-01

    Driven by new applications such as BiCMOS embedded RF-MEMS, high-Q passives, Si-based microfluidics for bio sensing and InP-Si BiCMOS heterointegration [1-4], accurate alignment between back and front side is highly desired. In this paper, we present an advanced back to front side alignment technique and implementation of it into the back side processing module of IHP's 0.25/0.13 ?m high performance SiGe:C BiCMOS technology. Using the Nikon i-line Stepper NSR-SF150, a new infrared alignment system has been introduced. The developed technique enables a high resolution and accurate lithography on the back side of the BiCMOS-processed Si wafers for additional backside processing, such as backside routing metallization. In comparison to previous work [5] with overlay values of 500 nm and the requirement of two-step lithography, the new approach provides significant improvement in the overlay accuracy with overlay values of 200 nm and a significant increase of the fabrication throughput by eliminating the need of the two-step lithography. The new non-contact alignment procedure allows a direct back to front side alignment using any front side alignment mark (Fig. 2), which generated a signal by reflecting the IR light beam. Followed by a measurement of the misalignment between both front to back side overlay marks (Fig. 3) using EVGNT40 automated measurement system, a final lithography process with wafer interfield corrections is applied to obtain a minimum overlay of 200 nm. For the specific application of deep Si etching using Bosch process, the etch profile angle deviation across the wafer (tilting) has to be considered as well. From experimental data, an etch profile angle deviation of 8 ?m across the wafer has been measured (Fig. 7). The overlay error caused by tilting was corrected by optimization and adjustment of the stepper offset parameters. All measurements of back to front side misalignment were performed with the EVG40NT automated measurement system whereas the deep etch tilting errors were measured with an optical microscope using special vernier scales embedded in the backend-of-line metallization layer (Fig 4 and Fig. 5) of the IHP's 0.25/0.13 ?m SiGe:C BiCMOS technology. By applying the proposed method of back to front side alignment using infrared illumination alignment, the accuracy of backside fabrication processes like deep Si etching can be significantly improved. The developed technique is very promising to shrink the dimensions by minimizing the back to front side misalignment to improve the device performance of backside integrated components and technologies.

  8. Characterization of silicon-gate CMOS/SOS integrated circuits processed with ion implantation

    NASA Technical Reports Server (NTRS)

    Woo, D. S.

    1977-01-01

    Progress in developing the application of ion implantation techniques to silicon gate CMOS/SOS processing is described. All of the conventional doping techniques such as in situ doping of the epi-film and diffusion by means of doped oxides are replaced by ion implantation. Various devices and process parameters are characterized to generate an optimum process by the use of an existing SOS test array. As a result, excellent circuit performance is achieved. A general description of the all ion implantation process is presented.

  9. Photo-Spectrometer Realized In A Standard Cmos Ic Process

    DOEpatents

    Simpson, Michael L. (Knoxville, TN); Ericson, M. Nance (Knoxville, TN); Dress, William B. (Knoxville, TN); Jellison, Gerald E. (Oak Ridge, TN); Sitter, Jr., David N. (Tucson, AZ); Wintenberg, Alan L. (Knoxville, TN)

    1999-10-12

    A spectrometer, comprises: a semiconductor having a silicon substrate, the substrate having integrally formed thereon a plurality of layers forming photo diodes, each of the photo diodes having an independent spectral response to an input spectra within a spectral range of the semiconductor and each of the photo diodes formed only from at least one of the plurality of layers of the semiconductor above the substrate; and, a signal processing circuit for modifying signals from the photo diodes with respective weights, the weighted signals being representative of a specific spectral response. The photo diodes have different junction depths and different polycrystalline silicon and oxide coverings. The signal processing circuit applies the respective weights and sums the weighted signals. In a corresponding method, a spectrometer is manufactured by manipulating only the standard masks, materials and fabrication steps of standard semiconductor processing, and integrating the spectrometer with a signal processing circuit.

  10. 0.8V ultralow-power CMOS analog multiplexer for remote biological and chemical signal processing

    NASA Astrophysics Data System (ADS)

    Zhang, Chuang; Srivastava, Ashok; Ajmera, Pratul K.

    2004-07-01

    A CMOS analog multiplexer circuit has been designed for operation at 0.8 V. The circuit consists of transmission gates as switches and an inverter. MOSFETs in the design of multiplexer use the dynamic body bias method. The forward body bias is limited to no more than 0.4 V to avoid CMOS latch-up. The reverse body bias is limited to 0.4 V and allows the MOSFET to turn-off fully and suppresses the sub-threshold leakage. The improved dynamic threshold MOSFET (DTMOS) inverter is engaged to achieve low voltage operation. The CMOS multiplexer chip was designed in standard 1.5 ?m n-well CMOS technology and simulated using SPICE. Excellent agreement was obtained between the simulated output waveform and corresponding experimentally measured behavior. The power dissipation is close to 70 nW and signal-to-leakage ratio is 120 dB. The proposed low voltage, ultra-low power analog multiplexer would find application for on-chip neural microprobes and other applications.

  11. Sub-bandgap polysilicon photodetector in zero-change CMOS process for telecommunication wavelength.

    PubMed

    Meng, Huaiyu; Atabaki, Amir; Orcutt, Jason S; Ram, Rajeev J

    2015-12-14

    We report a defect state based guided-wave photoconductive detector at 1360-1630 nm telecommunication wavelength directly in standard microelectronics CMOS processes, with zero in-foundry process modification. The defect states in the polysilicon used to define a transistor gate assists light absorption. The body crystalline silicon helps form an inverse ridge waveguide to confine optical mode. The measured responsivity and dark current at 25 V forward bias are 0.34 A/W and 1.4 ?A, respectively. The 3 dB bandwidth of the device is 1 GHz. PMID:26699053

  12. A linearity-enhanced time-domain CMOS thermostat with process-variation calibration.

    PubMed

    Chen, Chun-Chi; Lin, Yi

    2014-01-01

    This study proposes a linearity-enhanced time-domain complementary metal-oxide semiconductor (CMOS) thermostat with process-variation calibration for improving the accuracy, expanding the operating temperature range, and reducing test costs. For sensing temperatures in the time domain, the large characteristic curve of a CMOS inverter markedly affects the accuracy, particularly when the operating temperature range is increased. To enhance the on-chip linearity, this study proposes a novel temperature-sensing cell comprising a simple buffer and a buffer with a thermal-compensation circuit to achieve a linearised delay. Thus, a linearity-enhanced oscillator consisting of these cells can generate an oscillation period with high linearity. To achieve one-point calibration support, an adjustable-gain time stretcher and calibration circuit were adopted for the process-variation calibration. The programmable temperature set point was determined using a reference clock and a second (identical) adjustable-gain time stretcher. A delay-time comparator with a built-in customised hysteresis circuit was used to perform a time comparison to obtain an appropriate response. Based on the proposed design, a thermostat with a small area of 0.067 mm2 was fabricated using a TSMC 0.35-?m 2P4M CMOS process, and a robust resolution of 0.05 C and dissipation of 25 ?W were achieved at a sample rate of 10 samples/s. An inaccuracy of -0.35 C to 1.35 C was achieved after one-point calibration at temperatures ranging from -40 C to 120 C. Compared with existing thermostats, the proposed thermostat substantially improves the circuit area, accuracy, operating temperature range, and test costs. PMID:25310469

  13. A Linearity-Enhanced Time-Domain CMOS Thermostat with Process-Variation Calibration

    PubMed Central

    Chen, Chun-Chi; Lin, Yi

    2014-01-01

    This study proposes a linearity-enhanced time-domain complementary metal-oxide semiconductor (CMOS) thermostat with process-variation calibration for improving the accuracy, expanding the operating temperature range, and reducing test costs. For sensing temperatures in the time domain, the large characteristic curve of a CMOS inverter markedly affects the accuracy, particularly when the operating temperature range is increased. To enhance the on-chip linearity, this study proposes a novel temperature-sensing cell comprising a simple buffer and a buffer with a thermal-compensation circuit to achieve a linearised delay. Thus, a linearity-enhanced oscillator consisting of these cells can generate an oscillation period with high linearity. To achieve one-point calibration support, an adjustable-gain time stretcher and calibration circuit were adopted for the process-variation calibration. The programmable temperature set point was determined using a reference clock and a second (identical) adjustable-gain time stretcher. A delay-time comparator with a built-in customised hysteresis circuit was used to perform a time comparison to obtain an appropriate response. Based on the proposed design, a thermostat with a small area of 0.067 mm2 was fabricated using a TSMC 0.35-?m 2P4M CMOS process, and a robust resolution of 0.05 C and dissipation of 25 ?W were achieved at a sample rate of 10 samples/s. An inaccuracy of ?0.35 C to 1.35 C was achieved after one-point calibration at temperatures ranging from ?40 C to 120 C. Compared with existing thermostats, the proposed thermostat substantially improves the circuit area, accuracy, operating temperature range, and test costs. PMID:25310469

  14. Characterization of silicon-gate CMOS/SOS integrated circuits processed with ion implantation

    NASA Technical Reports Server (NTRS)

    Woo, D. S.

    1980-01-01

    The double layer metallization technology applied on p type silicon gate CMOS/SOS integrated circuits is described. A smooth metal surface was obtained by using the 2% Si-sputtered Al. More than 10% probe yield was achieved on solar cell controller circuit TCS136 (or MSFC-SC101). Reliability tests were performed on 15 arrays at 150 C. Only three arrays failed during the burn in, and 18 arrays out of 22 functioning arrays maintained the leakage current below 100 milli-A. Analysis indicates that this technology will be a viable process if the metal short circuit problem between the two metals can be reduced.

  15. Designing manufacturable MEMS in CMOS-compatible processes: methodology and case studies

    NASA Astrophysics Data System (ADS)

    Schropfer, Gerold; McNie, Mark; da Silva, Mark; Davies, Rhodri; Rickard, Alexandra; Musalem, Francois-Xavier

    2004-08-01

    Designing manufacturable MEMS devices requires a strong link between design and process engineers. Establishing systematic design principles through a common CAD framework facilitates this. A methodology for MEMS Design for Manufacturing (DFM) is presented that focuses on solid process and design qualification through systematic parametric modeling and testing, from initial development of specifications to volume manufacturing. This strategy has been applied to two MEMS fabrication processes, including CMOS-compatible SOI micromachining and metal-nitride surface micromachining. Case studies of designed, simulated, fabricated and characterized test structures demonstrate the methodology and benefits of the outlined DFM approach - including extraction of material properties and process capabilities enabling a prediction of fabricated device performance distribution. The overall result is a MEMS product design framework that incorporates a top-down design methodology with parametric re-usable libraries of MEMS, IC and relevant system components capable of allowing to design within a specific process (via a process design kit) to enable virtual manufacturing.

  16. An integrating CMOS APS for X-ray imaging with an in-pixel preamplifier

    NASA Astrophysics Data System (ADS)

    Abdalla, M. A.; Frjdh, C.; Petersson, C. S.

    2001-06-01

    We present in this paper an integrating CMOS Active Pixel Sensor (APS) circuit coated with scintillator type sensors for intra-oral dental X-ray imaging systems. The photosensing element in the pixel is formed by the p-diffusion on the n-well diode. The advantage of this photosensor is its very low direct absorption of X-rays compared to the other available photosensing elements in the CMOS pixel. The pixel features an integrating capacitor in the feedback loop of a preamplifier of a finite gain in order to increase the optical sensitivity. To verify the effectiveness of this in-pixel preamplification, a prototype 3280 element CMOS active pixel array was implemented in a 0.8 ?m CMOS double poly, n-well process with a pixel pitch of 50 ?m. Measured results confirmed the improved optical sensitivity performance of the APS. Various measurements on device performance are presented.

  17. A CMOS micromachined capacitive tactile sensor with integrated readout circuits and compensation of process variations.

    PubMed

    Tsai, Tsung-Heng; Tsai, Hao-Cheng; Wu, Tien-Keng

    2014-10-01

    This paper presents a capacitive tactile sensor fabricated in a standard CMOS process. Both of the sensor and readout circuits are integrated on a single chip by a TSMC 0.35 ?m CMOS MEMS technology. In order to improve the sensitivity, a T-shaped protrusion is proposed and implemented. This sensor comprises the metal layer and the dielectric layer without extra thin film deposition, and can be completed with few post-processing steps. By a nano-indenter, the measured spring constant of the T-shaped structure is 2.19 kNewton/m. Fully differential correlated double sampling capacitor-to-voltage converter (CDS-CVC) and reference capacitor correction are utilized to compensate process variations and improve the accuracy of the readout circuits. The measured displacement-to-voltage transductance is 7.15 mV/nm, and the sensitivity is 3.26 mV/?Newton. The overall power dissipation is 132.8 ?W. PMID:25314707

  18. Optical modulation techniques for analog signal processing and CMOS compatible electro-optic modulation

    NASA Astrophysics Data System (ADS)

    Gill, Douglas M.; Rasras, Mahmoud; Tu, Kun-Yii; Chen, Young-Kai; White, Alice E.; Patel, Sanjay S.; Carothers, Daniel; Pomerene, Andrew; Kamocsai, Robert; Beattie, James; Kopa, Anthony; Apsel, Alyssa; Beals, Mark; Mitchel, Jurgen; Liu, Jifeng; Kimerling, Lionel C.

    2008-02-01

    Integrating electronic and photonic functions onto a single silicon-based chip using techniques compatible with mass-production CMOS electronics will enable new design paradigms for existing system architectures and open new opportunities for electro-optic applications with the potential to dramatically change the management, cost, footprint, weight, and power consumption of today's communication systems. While broadband analog system applications represent a smaller volume market than that for digital data transmission, there are significant deployments of analog electro-optic systems for commercial and military applications. Broadband linear modulation is a critical building block in optical analog signal processing and also could have significant applications in digital communication systems. Recently, broadband electro-optic modulators on a silicon platform have been demonstrated based on the plasma dispersion effect. The use of the plasma dispersion effect within a CMOS compatible waveguide creates new challenges and opportunities for analog signal processing since the index and propagation loss change within the waveguide during modulation. We will review the current status of silicon-based electrooptic modulators and also linearization techniques for optical modulation.

  19. A robust color signal processing with wide dynamic range WRGB CMOS image sensor

    NASA Astrophysics Data System (ADS)

    Kawada, Shun; Kuroda, Rihito; Sugawa, Shigetoshi

    2011-01-01

    We have developed a robust color reproduction methodology by a simple calculation with a new color matrix using the formerly developed wide dynamic range WRGB lateral overflow integration capacitor (LOFIC) CMOS image sensor. The image sensor was fabricated through a 0.18 ?m CMOS technology and has a 45 degrees oblique pixel array, the 4.2 ?m effective pixel pitch and the W pixels. A W pixel was formed by replacing one of the two G pixels in the Bayer RGB color filter. The W pixel has a high sensitivity through the visible light waveband. An emerald green and yellow (EGY) signal is generated from the difference between the W signal and the sum of RGB signals. This EGY signal mainly includes emerald green and yellow lights. These colors are difficult to be reproduced accurately by the conventional simple linear matrix because their wave lengths are in the valleys of the spectral sensitivity characteristics of the RGB pixels. A new linear matrix based on the EGY-RGB signal was developed. Using this simple matrix, a highly accurate color processing with a large margin to the sensitivity fluctuation and noise has been achieved.

  20. Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

    PubMed Central

    Tseng, Jian-Zhi; Wu, Chyan-Chyi; Dai, Ching-Liang

    2014-01-01

    The modeling and fabrication of a magnetic microsensor based on a magneto-transistor were presented. The magnetic sensor is fabricated by the commercial 0.18 ?m complementary metal oxide semiconductor (CMOS) process without any post-process. The finite element method (FEM) software Sentaurus TCAD is utilized to analyze the electrical properties and carriers motion path of the magneto-transistor. A readout circuit is used to amplify the voltage difference of the bases into the output voltage. Experiments show that the sensitivity of the magnetic sensor is 354 mV/T at the supply current of 4 mA. PMID:24732100

  1. Low Temperature Processed Complementary Metal Oxide Semiconductor (CMOS) Device by Oxidation Effect from Capping Layer

    PubMed Central

    Wang, Zhenwei; Al-Jawhari, Hala A.; Nayak, Pradipta K.; Caraveo-Frescas, J. A.; Wei, Nini; Hedhili, M. N.; Alshareef, H. N.

    2015-01-01

    In this report, both p- and n-type tin oxide thin-film transistors (TFTs) were simultaneously achieved using single-step deposition of the tin oxide channel layer. The tuning of charge carrier polarity in the tin oxide channel is achieved by selectively depositing a copper oxide capping layer on top of tin oxide, which serves as an oxygen source, providing additional oxygen to form an n-type tin dioxide phase. The oxidation process can be realized by annealing at temperature as low as 190°C in air, which is significantly lower than the temperature generally required to form tin dioxide. Based on this approach, CMOS inverters based entirely on tin oxide TFTs were fabricated. Our method provides a solution to lower the process temperature for tin dioxide phase, which facilitates the application of this transparent oxide semiconductor in emerging electronic devices field. PMID:25892711

  2. Micro ethanol sensors with a heater fabricated using the commercial 0.18 ?m CMOS process.

    PubMed

    Liao, Wei-Zhen; Dai, Ching-Liang; Yang, Ming-Zhi

    2013-01-01

    The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 m complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated electrodes. The sensitive film is zinc oxide prepared by the sol-gel method, and it is coated on the interdigitated electrodes. The heater is located under the interdigitated electrodes, and it is used to supply a working temperature to the sensitive film. The sensor needs a post-processing step to remove the sacrificial oxide layer, and to coat zinc oxide on the interdigitated electrodes. When the sensitive film senses ethanol gas, the resistance of the sensor generates a change. An inverting amplifier circuit is utilized to convert the resistance variation of the sensor into the output voltage. Experiments show that the sensitivity of the ethanol sensor is 0.35 mV/ppm. PMID:24072022

  3. Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 ?m CMOS Process

    PubMed Central

    Liao, Wei-Zhen; Dai, Ching-Liang; Yang, Ming-Zhi

    2013-01-01

    The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 ?m complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated electrodes. The sensitive film is zinc oxide prepared by the sol-gel method, and it is coated on the interdigitated electrodes. The heater is located under the interdigitated electrodes, and it is used to supply a working temperature to the sensitive film. The sensor needs a post-processing step to remove the sacrificial oxide layer, and to coat zinc oxide on the interdigitated electrodes. When the sensitive film senses ethanol gas, the resistance of the sensor generates a change. An inverting amplifier circuit is utilized to convert the resistance variation of the sensor into the output voltage. Experiments show that the sensitivity of the ethanol sensor is 0.35 mV/ppm. PMID:24072022

  4. Development of a novel thermal switch through CMOS MEMS fabrication process

    NASA Astrophysics Data System (ADS)

    Lai, You-Liang; Chou, Lei-Chun; Juang, Ying-Zong; Tsai, Hann-Huei; Huang, Sheng-Chieh; Chiou, Jin-Chern

    2011-03-01

    This paper focuses on implementing two novel CMOS-MEMS type switches: buckling type and thermal type, by using commercially available TSMC 0.35 ?m two-poly four-metal (2P4M) CMOS process. There are two novel designs in these two type switches: first, the soft contact structure with post-processing fabrication; second, using residual stress to achieve large structural deformation in buckling type and thermal type switches. To create the soft contact structure, residual gradient stress effect has been utilized to make bending-down curvatures. According to the experiments, the layer Metal1 has the largest negative residual gradient stress effect that can achieve the largest negative deflection in z-axis. Because the structure will bend down after post-processing release, larger lateral contact area are set up to gain the lower contact miss ability. In the post-processing fabrication, 0.3?m thickness gold will be deposited on the contact tips. Due to the essence of gold, comparing with aluminum, has no oxidation issue, gold also has the advantage of higher conductivity to reduce the electrical power loss. In the buckling type design, the switch uses residual stress to achieve lateral buckling effect to solve long distance problem. In the thermal type design, this paper design a folded-flexure with the electro-thermal excitation to turn the switch on or off. In the prototype, the device size is 500 ?m x 400 ?m and the gap between two contact pads is 9 ?m in off-state. on the experimental results, the switch can work stably at 3 volts, and the displacement of the thermal type switch can achieve 2.7?m, which is sufficient for the mechanism of switching-on or switching-off.

  5. Introducing photonic devices for 40Gbits/s wavelength division multiplexing transceivers on 300-mm SOI wafers using CMOS processes

    NASA Astrophysics Data System (ADS)

    Baudot, Charles; Fdli, Jean-Marc; Marris-Morini, Delphine; Caire-Remonnay, Boris; Virot, Lopold; Olivier, Sgolne; Myko, Andr; Grosse, Philippe; Grand, Gilles; Ben Bakir, Badhise; Hartmann, Jean-Michel; Allouti, Nacima; Barnola, Sbastien; Vizioz, Christian; Rivoire, Maurice; Seignard, Aurlien; Vulliet, Nathalie; Souhait, Aurlie; Messaoudne, Sonia; O'Connor, Ian; Vivien, Laurent; Menezo, Sylvie; Boeuf, Frdric

    2014-03-01

    We demonstrate the feasibility of producing advanced silicon photonic devices for future data communication nodes at 40Gbps using CMOS compatible processes in a 300mm wafer fab. Basic building blocks are shown together with various wavelength division multiplexing solutions. All the devices presented are integrated on 220nm SOI or locally grown epitaxial germanium.

  6. Pick-and-place process for sensitivity improvement of the capacitive type CMOS MEMS 2-axis tilt sensor

    NASA Astrophysics Data System (ADS)

    Chang, Chun-I.; Tsai, Ming-Han; Liu, Yu-Chia; Sun, Chih-Ming; Fang, Weileun

    2013-09-01

    This study exploits the foundry available complimentary metal-oxide-semiconductor (CMOS) process and the packaging house available pick-and-place technology to implement a capacitive type micromachined 2-axis tilt sensor. The suspended micro mechanical structures such as the spring, stage and sensing electrodes are fabricated using the CMOS microelectromechanical systems (MEMS) processes. A bulk block is assembled onto the suspended stage by pick-and-place technology to increase the proof-mass of the tilt sensor. The low temperature UV-glue dispensing and curing processes are employed to bond the block onto the stage. Thus, the sensitivity of the CMOS MEMS capacitive type 2-axis tilt sensor is significantly improved. In application, this study successfully demonstrates the bonding of a bulk solder ball of 100 µm in diameter with a 2-axis tilt sensor fabricated using the standard TSMC 0.35 µm 2P4M CMOS process. Measurements show the sensitivities of the 2-axis tilt sensor are increased for 2.06-fold (x-axis) and 1.78-fold (y-axis) after adding the solder ball. Note that the sensitivity can be further improved by reducing the parasitic capacitance and the mismatch of sensing electrodes caused by the solder ball.

  7. Avoiding sensor blindness in Geiger mode avalanche photodiode arrays fabricated in a conventional CMOS process

    NASA Astrophysics Data System (ADS)

    Vilella, E.; Diguez, A.

    2011-12-01

    The need to move forward in the knowledge of the subatomic world has stimulated the development of new particle colliders. However, the objectives of the next generation of colliders sets unprecedented challenges to the detector performance. The purpose of this contribution is to present a bidimensional array based on avalanche photodiodes operated in the Geiger mode to track high energy particles in future linear colliders. The bidimensional array can function in a gated mode to reduce the probability to detect noise counts interfering with real events. Low reverse overvoltages are used to lessen the dark count rate. Experimental results demonstrate that the prototype fabricated with a standard HV-CMOS process presents an increased efficiency and avoids sensor blindness by applying the proposed techniques.

  8. Nonlinear optical signal processing in high figure of merit CMOS compatible platforms

    NASA Astrophysics Data System (ADS)

    Moss, D. J.; Morandotti, R.

    2015-05-01

    Photonic integrated circuits that exploit nonlinear optics in order to generate and process signals all-optically have achieved performance far superior to that possible electronically - particularly with respect to speed. Although silicon-on-insulator has been the leading platform for nonlinear optics for some time, its high two-photon absorption at telecommunications wavelengths poses a fundamental limitation. We review the recent achievements based in new CMOS-compatible platforms that are better suited than SOI for nonlinear optics, focusing on amorphous silicon and Hydex glass. We highlight their potential as well as the challenges to achieving practical solutions for many key applications. These material systems have opened up many new capabilities such as on-chip optical frequency comb generation and ultrafast optical pulse generation and measurement.

  9. Ge microdisk with lithographically-tunable strain using CMOS-compatible process.

    PubMed

    Sukhdeo, David S; Petykiewicz, Jan; Gupta, Shashank; Kim, Daeik; Woo, Sungdae; Kim, Youngmin; Vu?kovi?, Jelena; Saraswat, Krishna C; Nam, Donguk

    2015-12-28

    We present germanium microdisk optical resonators under a large biaxial tensile strain using a CMOS-compatible fabrication process. Biaxial tensile strain of ~0.7% is achieved by means of a stress concentration technique that allows the strain level to be customized by carefully selecting certain lithographic dimensions. The partial strain relaxation at the edges of a patterned germanium microdisk is compensated by depositing compressively stressed silicon nitride layer. Two-dimensional Raman spectroscopy measurements along with finite-element method simulations confirm a relatively homogeneous strain distribution within the final microdisk structure. Photoluminescence results show clear optical resonances due to whispering gallery modes which are in good agreement with finite-difference time-domain optical simulations. Our bandgap-customizable microdisks present a new route towards an efficient germanium light source for on-chip optical interconnects. PMID:26831991

  10. Narrow-band waveguide Bragg gratings on SOI wafers with CMOS-compatible fabrication process.

    PubMed

    Wang, Xu; Shi, Wei; Yun, Han; Grist, Samantha; Jaeger, Nicolas A F; Chrostowski, Lukas

    2012-07-01

    We demonstrate the design, fabrication and measurement of integrated Bragg gratings in a compact single-mode silicon-on-insulator ridge waveguide. The gratings are realized by corrugating the sidewalls of the waveguide, either on the ridge or on the slab. The coupling coefficient is varied by changing the corrugation width which allows precise control of the bandwidth and has a high fabrication tolerance. The grating devices are fabricated using a CMOS-compatible process with 193 nm deep ultraviolet lithography. Spectral measurements show bandwidths as narrow as 0.4 nm, which are promising for on-chip applications that require narrow bandwidths such as WDM channel filters. We also present the die-to-die nonuniformity for the grating devices on the wafer, and our analysis shows that the Bragg wavelength deviation is mainly caused by the wafer thickness variation. PMID:22772250

  11. New mechanism of plasma induced damage on CMOS image sensor: Analysis and process optimization

    NASA Astrophysics Data System (ADS)

    Carrre, J. P.; Oddou, J. P.; Place, S.; Richard, C.; Benoit, D.; Jenny, C.; Gatefait, M.; Aumont, C.; Tournier, A.; Roy, F.

    2011-11-01

    A new plasma induced damage mechanism on CMOS image sensor is analyzed. An increase of the mean pixel dark current is observed after the plasma etch of a cavity on the pixel area. The degradation increases non-linearly when the dielectric layers between the photodiode and the plasma become thinner. This can be explained by a photo generation phenomenon in the dielectric nitride layer, induced by the plasma UV, and assisted by the wafer surface charge. This mechanism leads to the creation of a positive fixed charge on the pixel surface, which can next deplete the top P layer of the pinned photodiode. The temperature dependence of the dark current again demonstrates that the degradation is mainly due to a diode surface generation effect. Process and pixel architecture optimization are finally proposed.

  12. Ge microdisk with lithographically-tunable strain using CMOS-compatible process

    NASA Astrophysics Data System (ADS)

    Sukhdeo, David S.; Petykiewicz, Jan; Gupta, Shashank; Kim, Daeik; Woo, Sungdae; Kim, Youngmin; Vu?kovi?, Jelena; Saraswat, Krishna C.; Nam, Donguk

    2015-12-01

    We present germanium microdisk optical resonators under a large biaxial tensile strain using a CMOS-compatible fabrication process. Biaxial tensile strain of ~0.7% is achieved by means of a stress concentration technique that allows the strain level to be customized by carefully selecting certain lithographic dimensions. The partial strain relaxation at the edges of a patterned germanium microdisk is compensated by depositing compressively stressed silicon nitride layer. Two-dimensional Raman spectroscopy measurements along with finite-element method simulations confirm a relatively homogeneous strain distribution within the final microdisk structure. Photoluminescence results show clear optical resonances due to whispering gallery modes which are in good agreement with finite-difference time-domain optical simulations. Our bandgap-customizable microdisks present a new route towards an efficient germanium light source for on-chip optical interconnects.

  13. Laser doppler blood flow imaging using a CMOS imaging sensor with on-chip signal processing.

    PubMed

    He, Diwei; Nguyen, Hoang C; Hayes-Gill, Barrie R; Zhu, Yiqun; Crowe, John A; Gill, Cally; Clough, Geraldine F; Morgan, Stephen P

    2013-01-01

    The first fully integrated 2D CMOS imaging sensor with on-chip signal processing for applications in laser Doppler blood flow (LDBF) imaging has been designed and tested. To obtain a space efficient design over 64 64 pixels means that standard processing electronics used off-chip cannot be implemented. Therefore the analog signal processing at each pixel is a tailored design for LDBF signals with balanced optimization for signal-to-noise ratio and silicon area. This custom made sensor offers key advantages over conventional sensors, viz. the analog signal processing at the pixel level carries out signal normalization; the AC amplification in combination with an anti-aliasing filter allows analog-to-digital conversion with a low number of bits; low resource implementation of the digital processor enables on-chip processing and the data bottleneck that exists between the detector and processing electronics has been overcome. The sensor demonstrates good agreement with simulation at each design stage. The measured optical performance of the sensor is demonstrated using modulated light signals and in vivo blood flow experiments. Images showing blood flow changes with arterial occlusion and an inflammatory response to a histamine skin-prick demonstrate that the sensor array is capable of detecting blood flow signals from tissue. PMID:24051525

  14. Laser Doppler Blood Flow Imaging Using a CMOS Imaging Sensor with On-Chip Signal Processing

    PubMed Central

    He, Diwei; Nguyen, Hoang C.; Hayes-Gill, Barrie R.; Zhu, Yiqun; Crowe, John A.; Gill, Cally; Clough, Geraldine F.; Morgan, Stephen P.

    2013-01-01

    The first fully integrated 2D CMOS imaging sensor with on-chip signal processing for applications in laser Doppler blood flow (LDBF) imaging has been designed and tested. To obtain a space efficient design over 64 64 pixels means that standard processing electronics used off-chip cannot be implemented. Therefore the analog signal processing at each pixel is a tailored design for LDBF signals with balanced optimization for signal-to-noise ratio and silicon area. This custom made sensor offers key advantages over conventional sensors, viz. the analog signal processing at the pixel level carries out signal normalization; the AC amplification in combination with an anti-aliasing filter allows analog-to-digital conversion with a low number of bits; low resource implementation of the digital processor enables on-chip processing and the data bottleneck that exists between the detector and processing electronics has been overcome. The sensor demonstrates good agreement with simulation at each design stage. The measured optical performance of the sensor is demonstrated using modulated light signals and in vivo blood flow experiments. Images showing blood flow changes with arterial occlusion and an inflammatory response to a histamine skin-prick demonstrate that the sensor array is capable of detecting blood flow signals from tissue. PMID:24051525

  15. A CMOS high resolution, process/temperature variation tolerant RSSI for WIA-PA transceiver

    NASA Astrophysics Data System (ADS)

    Tao, Yang; Yu, Jiang; Jie, Li; Jiangfei, Guo; Hua, Chen; Jingyu, Han; Guiliang, Guo; Yuepeng, Yan

    2015-08-01

    This paper presents a high resolution, process/temperature variation tolerant received signal strength indicator (RSSI) for wireless networks for industrial automation process automation (WIA-PA) transceiver fabricated in 0.18 ?m CMOS technology. The active area of the RSSI is 0.24 mm2. Measurement results show that the proposed RSSI has a dynamic range more than 70 dB and the linearity error is within 0.5 dB for an input power from -70 to 0 dBm (dBm to 50 ?), the corresponding output voltage is from 0.81 to 1.657 V and the RSSI slope is 12.1 mV/dB while consuming all of 2 mA from a 1.8 V power supply. Furthermore, by the help of the integrated compensation circuit, the proposed RSSI shows the temperature error within 1.5 dB from -40 to 85 C, and process variation error within 0.25 dB, which exhibits good temperature-independence and excellent robustness against process variation characteristics. Project supported by the National High Technology Research and Development Program of China (No. 2011AA040102).

  16. Characterization of silicon-gate CMOS/SOS integrated circuits processed with ion implantation

    NASA Technical Reports Server (NTRS)

    Woo, D. S.

    1982-01-01

    The procedure used to generate MEBES masks and produce test wafers from the 10X Mann 1600 Pattern Generator Tape using existing CAD utility programs and the MEBES machine in the RCA Solid State Technology Center are described. The test vehicle used is the MSFC-designed SC102 Solar House Timing Circuit. When transforming the Mann 1600 tapes into MEBES tapes, extreme care is required in order to obtain accurate minimum linewidths when working with two different coding systems because the minimum grid sizes may be different for the two systems. The minimum grid sizes are 0.025 mil for MSFC Mann 1600 and 0.02 mil for MEBES. Some snapping to the next grid is therefore inevitable, and the results of this snapping effect are significant when submicron lines are present. However, no problem was noticed in the SC102 circuit because its minimum linewidth is 0.3 mil (7.6 microns). MEBES masks were fabricated and wafers were processed using the silicon-gate CMOS/SOS and aluminum-gate COS/MOS processing.

  17. Design and implementation of non-linear image processing functions for CMOS image sensor

    NASA Astrophysics Data System (ADS)

    Musa, Purnawarman; Sudiro, Sunny A.; Wibowo, Eri P.; Harmanto, Suryadi; Paindavoine, Michel

    2012-11-01

    Today, solid state image sensors are used in many applications like in mobile phones, video surveillance systems, embedded medical imaging and industrial vision systems. These image sensors require the integration in the focal plane (or near the focal plane) of complex image processing algorithms. Such devices must meet the constraints related to the quality of acquired images, speed and performance of embedded processing, as well as low power consumption. To achieve these objectives, low-level analog processing allows extracting the useful information in the scene directly. For example, edge detection step followed by a local maxima extraction will facilitate the high-level processing like objects pattern recognition in a visual scene. Our goal was to design an intelligent image sensor prototype achieving high-speed image acquisition and non-linear image processing (like local minima and maxima calculations). For this purpose, we present in this article the design and test of a 64×64 pixels image sensor built in a standard CMOS Technology 0.35 μm including non-linear image processing. The architecture of our sensor, named nLiRIC (non-Linear Rapid Image Capture), is based on the implementation of an analog Minima/Maxima Unit. This MMU calculates the minimum and maximum values (non-linear functions), in real time, in a 2×2 pixels neighbourhood. Each MMU needs 52 transistors and the pitch of one pixel is 40×40 mu m. The total area of the 64×64 pixels is 12.5mm2. Our tests have shown the validity of the main functions of our new image sensor like fast image acquisition (10K frames per second), minima/maxima calculations in less then one ms.

  18. Scaling trends in SET pulse widths in Sub-100 nm bulk CMOS processes.

    SciTech Connect

    Narasimham, Balaji; Ahlbin, Jonathan R.; Schrimpf, Ronald D.; Gadlage, Matthew J.; Massengill, Lloyd W.; Vizkelethy, Gyorgy; Reed, Robert A.; Bhuva, Bharat L.

    2010-07-01

    Digital single-event transient (SET) measurements in a bulk 65-nm process are compared to transients measured in 130-nm and 90-nm processes. The measured SET widths are shorter in a 65-nm test circuit than SETs measured in similar 90-nm and 130-nm circuits, but, when the factors affecting the SET width measurements (in particular pulse broadening and the parasitic bipolar effect) are considered, the actual SET width trends are found to be more complex. The differences in the SET widths between test circuits can be attributed in part to differences in n-well contact area. These results help explain some of the inconsistencies in SET measurements presented by various researchers over the past few years.

  19. Integrated CMOS photodetectors and signal processing for very low-level chemical sensing with the bioluminescent bioreporter integrated circuit

    NASA Technical Reports Server (NTRS)

    Bolton, Eric K.; Sayler, Gary S.; Nivens, David E.; Rochelle, James M.; Ripp, Steven; Simpson, Michael L.

    2002-01-01

    We report an integrated CMOS microluminometer optimized for the detection of low-level bioluminescence as part of the bioluminescent bioreporter integrated circuit (BBIC). This microluminometer improves on previous devices through careful management of the sub-femtoampere currents, both signal and leakage, that flow in the front-end processing circuitry. In particular, the photodiode is operated with a reverse bias of only a few mV, requiring special attention to the reset circuitry of the current-to-frequency converter (CFC) that forms the front-end circuit. We report a sub-femtoampere leakage current and a minimum detectable signal (MDS) of 0.15 fA (1510 s integration time) using a room temperature 1.47 mm2 CMOS photodiode. This microluminometer can detect luminescence from as few as 5000 fully induced Pseudomonas fluorescens 5RL bacterial cells. c2002 Elsevier Science B.V. All rights reserved.

  20. A RF receiver frontend for SC-UWB in a 0.18-?m CMOS process

    NASA Astrophysics Data System (ADS)

    Rui, Guo; Haiying, Zhang

    2012-12-01

    A radio frequency (RF) receiver frontend for single-carrier ultra-wideband (SC-UWB) is presented. The front end employs direct-conversion architecture, and consists of a differential low noise amplifier (LNA), a quadrature mixer, and two intermediate frequency (IF) amplifiers. The proposed LNA employs source inductively degenerated topology. First, the expression of input impedance matching bandwidth in terms of gate-source capacitance, resonant frequency and target S11 is given. Then, a noise figure optimization strategy under gain and power constraints is proposed, with consideration of the integrated gate inductor, the bond-wire inductance, and its variation. The LNA utilizes two stages with different resonant frequencies to acquire flat gain over the 7.1-8.1 GHz frequency band, and has two gain modes to obtain a higher receiver dynamic range. The mixer uses a double balanced Gilbert structure. The front end is fabricated in a TSMC 0.18-?m RF CMOS process and occupies an area of 1.43 mm2. In high and low gain modes, the measured maximum conversion gain are 42 dB and 22 dB, input 1 dB compression points are -40 dBm and -20 dBm, and S11 is better than -18 dB and -14.5 dB. The 3 dB IF bandwidth is more than 500 MHz. The double sideband noise figure is 4.7 dB in high gain mode. The total power consumption is 65 mW from a 1.8 V supply.

  1. Novel processes for modular integration of silicon-germanium MEMS with CMOS electronics

    NASA Astrophysics Data System (ADS)

    Low, Carrie Wing-Zin

    Equipment control, process development and materials characterization for LPCVD poly-SiGe for MEMS applications are investigated in this work. In order to develop a repeatable process in an academic laboratory, equipment monitoring methods are implemented and new process gases are explored. With the dopant gas BCl3, the design-of-experiments technique is used to study the dependencies of deposition rate, resistivity, average residual stress, strain gradient and wet etch rate in hydrogen-peroxide. Structural layer requirements for general MEMS applications are met within the process temperature constraint imposed by CMOS electronics. However, the strain gradient required for inertial sensor applications is difficult to achieve with as-deposited films. Approaches to reduce the strain gradient of LPCVD poly-SiGe are investigated. Correlation between the strain gradient and film microstructure is found using stress-depth profiling and cross-sectional TEM analysis. The effects of film deposition conditions on film microstructure are also determined. Boron-doped poly-SiGe films generally have vertically oriented grains---either conical or columnar in shape. Films with conical grain structure have large strain gradient due to highly compressive stress in the lower (initially deposited) region of the film. Films with small strain gradient usually have columnar grain structure with low defect density. It is also found that the uniformity of films deposited in a batch LPCVD reactor can be improved by increasing the deposited film thickness, using a proper seeding layer, and/or depositing the film in multiple layers. The best strain gradient achieved in our academic research laboratory is 1.1x10-6 mum-1 for a 3.5 mum thick film deposited at 410C in 8 hours, with a worst-case variation across a 150 mm-diameter wafer of 1.6x10 -5 mum-1 and a worse-case variation across a load of twenty-five wafers of 7x10-5 mum-1. The effects of post-deposition annealing and argon implantation on mechanical properties are also studied. While the as-deposited film can achieve the desired mechanical properties, post-deposition processing at elevated temperatures can degrade the strain gradient.

  2. Thermal Radiometer Signal Processing using Radiation Hard CMOS Application Specific Integrated Circuits for use in Harsh Planetary Environments

    NASA Astrophysics Data System (ADS)

    Quilligan, G.; DuMonthier, J.; Aslam, S.; Lakew, B.; Kleyner, I.; Katz, R.

    2015-10-01

    Thermal radiometers such as proposed for the Europa Clipper flyby mission [1] require low noise signal processing for thermal imaging with immunity to Total Ionizing Dose (TID) and Single Event Latchup (SEL). Described is a second generation Multi- Channel Digitizer (MCD2G) Application Specific Integrated Circuit (ASIC) that accurately digitizes up to 40 thermopile pixels with greater than 50 Mrad (Si) immunity TID and 174 MeV-cm2/mg SEL. The MCD2G ASIC uses Radiation Hardened By Design (RHBD) techniques with a 180 nm CMOS process node.

  3. Thermal Radiometer Signal Processing Using Radiation Hard CMOS Application Specific Integrated Circuits for Use in Harsh Planetary Environments

    NASA Technical Reports Server (NTRS)

    Quilligan, G.; DuMonthier, J.; Aslam, S.; Lakew, B.; Kleyner, I.; Katz, R.

    2015-01-01

    Thermal radiometers such as proposed for the Europa Clipper flyby mission require low noise signal processing for thermal imaging with immunity to Total Ionizing Dose (TID) and Single Event Latchup (SEL). Described is a second generation Multi- Channel Digitizer (MCD2G) Application Specific Integrated Circuit (ASIC) that accurately digitizes up to 40 thermopile pixels with greater than 50 Mrad (Si) immunity TID and 174 MeV-sq cm/mg SEL. The MCD2G ASIC uses Radiation Hardened By Design (RHBD) techniques with a 180 nm CMOS process node.

  4. Digital pixel CMOS focal plane array with on-chip multiply accumulate units for low-latency image processing

    NASA Astrophysics Data System (ADS)

    Little, Jeffrey W.; Tyrrell, Brian M.; D'Onofrio, Richard; Berger, Paul J.; Fernandez-Cull, Christy

    2014-06-01

    A digital pixel CMOS focal plane array has been developed to enable low latency implementations of image processing systems such as centroid trackers, Shack-Hartman wavefront sensors, and Fitts correlation trackers through the use of in-pixel digital signal processing (DSP) and generic parallel pipelined multiply accumulate (MAC) units. Light intensity digitization occurs at the pixel level, enabling in-pixel DSP and noiseless data transfer from the pixel array to the peripheral processing units. The pipelined processing of row and column image data prior to off chip readout reduces the required output bandwidth of the image sensor, thus reducing the latency of computations necessary to implement various image processing systems. Data volume reductions of over 80% lead to sub 10?s latency for completing various tracking and sensor algorithms. This paper details the architecture of the pixel-processing imager (PPI) and presents some initial results from a prototype device fabricated in a standard 65nm CMOS process hybridized to a commercial off-the-shelf short-wave infrared (SWIR) detector array.

  5. Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applications

    NASA Astrophysics Data System (ADS)

    Michaelis, Sven; Timme, Hans-Jrg; Wycisk, Michael; Binder, Josef

    2000-06-01

    This paper presents an acceleration-threshold sensor fabricated with an electroplating technology which can be integrated on top of a pre-processed CMOS signal processing circuit. The device can be manufactured using a standard low-cost CMOS production line and then adding the mechanical sensor elements via a specialized back-end process. This makes the system especially interesting for automotive applications, such as airbag safety systems or transportation shock monitoring systems, where smaller size, improved functionality, high reliability and low costs are important.

  6. Analysis of pixel circuits in CMOS image sensors

    NASA Astrophysics Data System (ADS)

    Mei, Zou; Chen, Nan; Yao, Li-bin

    2015-04-01

    CMOS image sensors (CIS) have lower power consumption, lower cost and smaller size than CCD image sensors. However, generally CCDs have higher performance than CIS mainly due to lower noise. The pixel circuit used in CIS is the first part of the signal processing circuit and connected to photodiode directly, so its performance will greatly affect the CIS or even the whole imaging system. To achieve high performance, CMOS image sensors need advanced pixel circuits. There are many pixel circuits used in CIS, such as passive pixel sensor (PPS), 3T and 4T active pixel sensor (APS), capacitive transimpedance amplifier (CTIA), and passive pixel sensor (PPS). At first, the main performance parameters of each pixel structure including the noise, injection efficiency, sensitivity, power consumption, and stability of bias voltage are analyzed. Through the theoretical analysis of those pixel circuits, it is concluded that CTIA pixel circuit has good noise performance, high injection efficiency, stable photodiode bias, and high sensitivity with small integrator capacitor. Furthermore, the APS and CTIA pixel circuits are simulated in a standard 0.18-μm CMOS process and using a n-well/p-sub photodiode by SPICE and the simulation result confirms the theoretical analysis result. It shows the possibility that CMOS image sensors can be extended to a wide range of applications requiring high performance.

  7. Design and implementation of IEEE 802.11ac MAC controller in 65 nm CMOS process

    NASA Astrophysics Data System (ADS)

    Peng, Cheng; Bin, Wu; Yong, Hei

    2016-02-01

    An IEEE-802.11ac-1*1 wireless LAN system-on-a-chip (SoC) that integrates an analog front end, a digital base-band processor and a media access controller has been implemented in 65 nm CMOS technology. It can provide significantly increased throughput, high efficiency rate selection, and fully backward compatibility with the existing 802.11a/n WLAN protocols. Especially the measured maximum throughput of UDP traffic can be up to 267 Mbps. Project supported by the National Great Specific Project of China (No. 2012ZX03004004_001).

  8. Charge-coupled CMOS and hybrid detector arrays

    NASA Astrophysics Data System (ADS)

    Janesick, James R.

    2004-01-01

    Over a decade has passed since complementary metal oxide semiconductor (CMOS) imaging detectors made their move into the charge-coupled device (CCD) arena. Low cost, low power, on-chip system integration, high-speed operation and tolerance to high-energy radiation sources are unique features that make CMOS detectors popular. However, it remains unclear if CMOS arrays can compete with the CCD in high performance applications (e.g., scientific). This paper compares fundamental performance parameters common to both CMOS and CCD imagers, and lists specific SMOS performance deficiencies that prevent the technology from high end use. In this paper we will present custom CMOS pixel designs and related fabrication processes that solve most deficiencies. We will also discuss "hybrid" imaging arrays that marry the advantages of CCD and CMOS producing sensors with superior performance in comparison to CCD and CMOS bulk monolithic sensors. CCD to CMOS, CMOS to CMOS and CMOS SOI hybrids are reviewed.

  9. An acetone microsensor with a ring oscillator circuit fabricated using the commercial 0.18 ?m CMOS process.

    PubMed

    Yang, Ming-Zhi; Dai, Ching-Liang; Shih, Po-Jen

    2014-01-01

    This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 ?m complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive material, interdigitated electrodes and a polysilicon heater. The sensitive material is ?-Fe2O3 synthesized by the hydrothermal method. The sensor requires a post-process to remove the sacrificial oxide layer between the interdigitated electrodes and to coat the ?-Fe2O3 on the electrodes. When the sensitive material adsorbs acetone vapor, the sensor produces a change in capacitance. The ring oscillator circuit converts the capacitance of the sensor into the oscillation frequency output. The experimental results show that the output frequency of the acetone sensor changes from 128 to 100 MHz as the acetone concentration increases 1 to 70 ppm. PMID:25036331

  10. An Acetone Microsensor with a Ring Oscillator Circuit Fabricated Using the Commercial 0.18 ?m CMOS Process

    PubMed Central

    Yang, Ming-Zhi; Dai, Ching-Liang; Shih, Po-Jen

    2014-01-01

    This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 ?m complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive material, interdigitated electrodes and a polysilicon heater. The sensitive material is ?-Fe2O3 synthesized by the hydrothermal method. The sensor requires a post-process to remove the sacrificial oxide layer between the interdigitated electrodes and to coat the ?-Fe2O3 on the electrodes. When the sensitive material adsorbs acetone vapor, the sensor produces a change in capacitance. The ring oscillator circuit converts the capacitance of the sensor into the oscillation frequency output. The experimental results show that the output frequency of the acetone sensor changes from 128 to 100 MHz as the acetone concentration increases 1 to 70 ppm. PMID:25036331

  11. 5A Zirconium Dioxide Ammonia Microsensor Integrated with a Readout Circuit Manufactured Using the 0.18 ?m CMOS Process

    PubMed Central

    Lin, Guan-Ming; Dai, Ching-Liang; Yang, Ming-Zhi

    2013-01-01

    The study presents an ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 ?m complementary metal oxide semiconductor (CMOS) process. The integrated sensor chip consists of a heater, an ammonia sensor and a readout circuit. The ammonia sensor is constructed by a sensitive film and the interdigitated electrodes. The sensitive film is zirconium dioxide that is coated on the interdigitated electrodes. The heater is used to provide a working temperature to the sensitive film. A post-process is employed to remove the sacrificial layer and to coat zirconium dioxide on the sensor. When the sensitive film adsorbs or desorbs ammonia gas, the sensor produces a change in resistance. The readout circuit converts the resistance variation of the sensor into the output voltage. The experiments show that the integrated ammonia sensor has a sensitivity of 4.1 mV/ppm. PMID:23503294

  12. An Unassisted Low-Voltage-Trigger ESD Protection Structure in a 0.18-µm CMOS Process without Extra Process Cost

    NASA Astrophysics Data System (ADS)

    Li, Bing; Shan, Yi

    In order to quickly discharge the electrostatic discharge (ESD) energy, an unassisted low-voltage-trigger ESD protection structure is proposed in this work. Under transmission line pulsing (TLP) stress, the trigger voltage, turn-on speed and second breakdown current can be obviously improved, as compared with the traditional protection structure. Moreover there is no need to add any extra mask or do any process modification for the new structure. The proposed structure has been verified in foundry's 0.18-µm CMOS process.

  13. Effects of drain-wall in mitigating N-hit single event transient via 45 nm CMOS process

    NASA Astrophysics Data System (ADS)

    Y Xu, X.; Xiong, Y.; Tang, M. H.; Xiao, Y. G.; Yan, S. A.; Zhang, W. L.; Zhao, W.; Guo, H. X.; Li, Z.

    2015-01-01

    A three-dimensional (3D) technology computer-aided design (TCAD) simulation in a novel layout technique for N-hit single event transient (SET) mitigation based on drain-wall layout technique is proposed. Numerical simulations of both single-device and mixed-mode show that the proposed layout technique designed with 45 nm CMOS process can efficiently reduce not only charge collection but also SET pulse widths (WSET). What is more, simulations show that impacts caused by part of ion-incidents can be shielded with this novel layout technique. When compared with conventional layout technique and guard drain layout technique, we find that the proposed novel layout technique can provide the best benefit of SET mitigation with a small sacrifice in effective area.

  14. Fully Integrated Linear Single Photon Avalanche Diode (SPAD) Array with Parallel Readout Circuit in a Standard 180 nm CMOS Process

    NASA Astrophysics Data System (ADS)

    Isaak, S.; Bull, S.; Pitter, M. C.; Harrison, Ian.

    2011-05-01

    This paper reports on the development of a SPAD device and its subsequent use in an actively quenched single photon counting imaging system, and was fabricated in a UMC 0.18 ?m CMOS process. A low-doped p- guard ring (t-well layer) encircling the active area to prevent the premature reverse breakdown. The array is a 161 parallel output SPAD array, which comprises of an active quenched SPAD circuit in each pixel with the current value being set by an external resistor RRef = 300 k?. The SPAD I-V response, ID was found to slowly increase until VBD was reached at excess bias voltage, Ve = 11.03 V, and then rapidly increase due to avalanche multiplication. Digital circuitry to control the SPAD array and perform the necessary data processing was designed in VHDL and implemented on a FPGA chip. At room temperature, the dark count was found to be approximately 13 KHz for most of the 16 SPAD pixels and the dead time was estimated to be 40 ns.

  15. Designing a Ring-VCO for RFID Transponders in 0.18 μm CMOS Process

    PubMed Central

    Jalil, Jubayer; Reaz, Mamun Bin Ibne; Bhuiyan, Mohammad Arif Sobhan; Rahman, Labonnah Farzana; Chang, Tae Gyu

    2014-01-01

    In radio frequency identification (RFID) systems, performance degradation of phase locked loops (PLLs) mainly occurs due to high phase noise of voltage-controlled oscillators (VCOs). This paper proposes a low power, low phase noise ring-VCO developed for 2.42 GHz operated active RFID transponders compatible with IEEE 802.11 b/g, Bluetooth, and Zigbee protocols. For ease of integration and implementation of the module in tiny die area, a novel pseudodifferential delay cell based 3-stage ring oscillator has been introduced to fabricate the ring-VCO. In CMOS technology, 0.18 μm process is adopted for designing the circuit with 1.5 V power supply. The postlayout simulated results show that the proposed oscillator works in the tuning range of 0.5–2.54 GHz and dissipates 2.47 mW of power. It exhibits a phase noise of −126.62 dBc/Hz at 25 MHz offset from 2.42 GHz carrier frequency. PMID:24587731

  16. Designing a ring-VCO for RFID transponders in 0.18 μm CMOS process.

    PubMed

    Jalil, Jubayer; Reaz, Mamun Bin Ibne; Bhuiyan, Mohammad Arif Sobhan; Rahman, Labonnah Farzana; Chang, Tae Gyu

    2014-01-01

    In radio frequency identification (RFID) systems, performance degradation of phase locked loops (PLLs) mainly occurs due to high phase noise of voltage-controlled oscillators (VCOs). This paper proposes a low power, low phase noise ring-VCO developed for 2.42 GHz operated active RFID transponders compatible with IEEE 802.11 b/g, Bluetooth, and Zigbee protocols. For ease of integration and implementation of the module in tiny die area, a novel pseudodifferential delay cell based 3-stage ring oscillator has been introduced to fabricate the ring-VCO. In CMOS technology, 0.18 μm process is adopted for designing the circuit with 1.5 V power supply. The postlayout simulated results show that the proposed oscillator works in the tuning range of 0.5-2.54 GHz and dissipates 2.47 mW of power. It exhibits a phase noise of -126.62 dBc/Hz at 25 MHz offset from 2.42 GHz carrier frequency. PMID:24587731

  17. Radiation Characteristics of a 0.11 Micrometer Modified Commercial CMOS Process

    NASA Technical Reports Server (NTRS)

    Poivey, Christian; Kim, Hak; Berg, Melanie D.; Forney, Jim; Seidleck, Christina; Vilchis, Miguel A.; Phan, Anthony; Irwin, Tim; LaBel, Kenneth A.; Saigusa, Rajan K.; Mirabedini, Mohammad R.; Finlinson, Rick; Suvkhanov, Agajan; Hornback, Verne; Sung, Jun; Tung, Jeffrey

    2006-01-01

    We present radiation data, Total Ionizing Dose and Single Event Effects, on the LSI Logic 0.11 micron commercial process and two modified versions of this process. Modified versions include a buried layer to guarantee Single Event Latchup immunity.

  18. SEMICONDUCTOR INTEGRATED CIRCUITS: An enhanced close-in phase noise LC-VCO using parasitic V-NPN transistors in a CMOS process

    NASA Astrophysics Data System (ADS)

    Peijun, Gao; J, Oh N.; Hao, Min

    2009-08-01

    A differential LC voltage controlled oscillator (VCO) employing parasitic vertical-NPN (V-NPN) transistors as a negative gm-cell is presented to improve the close-in phase noise. The V-NPN transistors have lower flicker noise compared to MOS transistors. DC and AC characteristics of the V-NPN transistors are measured to facilitate the VCO design. The proposed VCO is implemented in a 0.18 ?m CMOS RF/mixed signal process, and the measurement results show the close-in phase noise is improved by 3.5-9.1 dB from 100 Hz to 10 kHz offset compared to that of a similar CMOS VCO. The proposed VCO consumes only 0.41 mA from a 1.5 V power supply.

  19. High-speed binary CMOS image sensor using a high-responsivity MOSFET-type photodetector

    NASA Astrophysics Data System (ADS)

    Choi, Byoung-Soo; Jo, Sung-Hyun; Bae, Myunghan; Choi, Pyung; Shin, Jang-Kyoo

    2015-03-01

    In this paper, a complementary metal oxide semiconductor (CMOS) binary image sensor based on a gate/body-tied (GBT) MOSFET-type photodetector is proposed. The proposed CMOS binary image sensor was simulated and measured using a standard CMOS 0.18-?m process. The GBT MOSFET-type photodetector is composed of a floating gate (n+- polysilicon) tied to the body (n-well) of the p-type MOSFET. The size of the active pixel sensor (APS) using GBT photodetector is smaller than that of APS using the photodiode. This means that the resolution of the image can be increased. The high-gain GBT photodetector has a higher photosensitivity compared to the p-n junction photodiode that is used in a conventional APS. Because GBT has a high sensitivity, fast operation of the binary processing is possible. A CMOS image sensor with the binary processing can be designed with simple circuits composed of a comparator and a Dflip- flop while a complex analog to digital converter (ADC) is not required. In addition, the binary image sensor has low power consumption and high speed operation with the ability to switch back and forth between a binary mode and an analog mode.

  20. CMOS Integrated Carbon Nanotube Sensor

    SciTech Connect

    Perez, M. S.; Lerner, B.; Boselli, A.; Lamagna, A.; Obregon, P. D. Pareja; Julian, P. M.; Mandolesi, P. S.; Buffa, F. A.

    2009-05-23

    Recently carbon nanotubes (CNTs) have been gaining their importance as sensors for gases, temperature and chemicals. Advances in fabrication processes simplify the formation of CNT sensor on silicon substrate. We have integrated single wall carbon nanotubes (SWCNTs) with complementary metal oxide semiconductor process (CMOS) to produce a chip sensor system. The sensor prototype was designed and fabricated using a 0.30 um CMOS process. The main advantage is that the device has a voltage amplifier so the electrical measure can be taken and amplified inside the sensor. When the conductance of the SWCNTs varies in response to media changes, this is observed as a variation in the output tension accordingly.

  1. Process optimization of developer soluble organic BARC and its characteristics in CMOS devices

    NASA Astrophysics Data System (ADS)

    Lim, Yeon Hwa; Kim, Young Keun; Choi, Jae Sung; Lee, Jeong Gun

    2005-05-01

    As the IC industry is moving toward 90nm node or below, the critical dimension size of implant layers has shrunk to 250nm or smaller. To achieve better CD uniformity, dyed KrF resist and top anti-reflective coating (TARC) are commonly used in advanced photo process of implant layers, while typical organic BARC are not used because it requires dry etch process that damages the substrate and needs additional process steps. In order to overcome those shortcomings, developable BARC is introduced. It is a new type of BARC which is soluble to developer, TMAH solution, in the resist development step. This developer-soluble KrF BARC consists of polyamic acid and its solubility to alkaline could be adjusted by changing bake condition. In this experiment, we evaluated the margin of developable BARC process. Developable BARC reduces the standing wave of photoresist and improves the ID bias and CD uniformity as applied to implant feature printing. However, Developable BARC has a narrow thermal process margin. It is the profile of developable BARC that easily changes according to the coating thickness or thermal process conditions. Even in the same bake conditions, developable BARC profile changes according to the pattern densities. To observe the effects of developable BARC on the device performance, we compare electrical data of devices produced with and without developable BARC. They have the differences in the threshold voltage, leakage current and saturation current. Probably, the residues of the developable BARC after the development bring about the differences.

  2. A hybrid CMOS-imager with a solution-processable polymer as photoactive layer.

    PubMed

    Baierl, Daniela; Pancheri, Lucio; Schmidt, Morten; Stoppa, David; Dalla Betta, Gian-Franco; Scarpa, Giuseppe; Lugli, Paolo

    2012-01-01

    The solution-processability of organic photodetectors allows a straightforward combination with other materials, including inorganic ones, without increasing cost and process complexity significantly compared with conventional crystalline semiconductors. Although the optoelectronic performance of these organic devices does not outmatch their inorganic counterparts, there are certain applications exploiting the benefit of the solution-processability. Here we demonstrate that the small pixel fill factor of present complementary metal oxide semiconductor-imagers, decreasing the light sensitivity, can be increased up to 100% by replacing silicon photodiodes with an organic photoactive layer deposited with a simple low-cost spray-coating process. By performing a full optoelectronic characterization on this first solution-processable hybrid complementary metal oxide semiconductor-imager, including the first reported observation of different noise types in organic photodiodes, we demonstrate the suitability of this novel device for imaging. Furthermore, by integrating monolithically different organic materials to the chip, we show the cost-effective portability of the hybrid concept to different wavelength regions. PMID:23132025

  3. Radiation tolerant circuits designed in 2 commercial 0.25{micro} CMOS processes

    SciTech Connect

    Mekkaoui, A.

    2001-03-08

    Characterization of simple devices as well as complex circuits, in two commercial 0.25{micro} processes, demonstrates a high level (up to 58 Mrad) radiation tolerance of these technologies. They are also very likely to be immune to single event gate damage according to the results from 200 MeV-protons irradiation.

  4. Low-Noise CMOS Circuits for On-Chip Signal Processing in Focal-Plane Arrays

    NASA Astrophysics Data System (ADS)

    Pain, Bedabrata

    The performance of focal-plane arrays can be significantly enhanced through the use of on-chip signal processing. Novel, in-pixel, on-focal-plane, analog signal-processing circuits for high-performance imaging are presented in this thesis. The presence of a high background-radiation is a major impediment for infrared focal-plane array design. An in-pixel, background-suppression scheme, using dynamic analog current memory circuit, is described. The scheme also suppresses spatial noise that results from response non-uniformities of photo-detectors, leading to background limited infrared detector readout performance. Two new, low-power, compact, current memory circuits, optimized for operation at ultra-low current levels required in infrared-detection, are presented. The first one is a self-cascading current memory that increases the output impedance, and the second one is a novel, switch feed-through reducing current memory, implemented using error-current feedback. This circuit can operate with a residual absolute -error of less than 0.1%. The storage-time of the memory is long enough to also find applications in neural network circuits. In addition, a voltage-mode, accurate, low-offset, low-power, high-uniformity, random-access sample-and-hold cell, implemented using a CCD with feedback, is also presented for use in background-suppression and neural network applications. A new, low noise, ultra-low level signal readout technique, implemented by individually counting photo-electrons within the detection pixel, is presented. The output of each unit-cell is a digital word corresponding to the intensity of the photon flux, and the readout is noise free. This technique requires the use of unit-cell amplifiers that feature ultra-high-gain, low-power, self-biasing capability and noise in sub-electron levels. Both single-input and differential-input implementations of such amplifiers are investigated. A noise analysis technique is presented for analyzing sampled-data systems having 1/f noise reduction capability. Closed form expressions have been derived and low-noise design criteria have been established, taking into account both the 1/f and white noise, and the effects of under-sampling. The analysis technique will be an important tool for analysis and design of a large variety of focal-plane sampled-data signal processing circuits.

  5. High Electron Mobility Transistor Structures on Sapphire Substrates Using CMOS Compatible Processing Techniques

    NASA Technical Reports Server (NTRS)

    Mueller, Carl; Alterovitz, Samuel; Croke, Edward; Ponchak, George

    2004-01-01

    System-on-a-chip (SOC) processes are under intense development for high-speed, high frequency transceiver circuitry. As frequencies, data rates, and circuit complexity increases, the need for substrates that enable high-speed analog operation, low-power digital circuitry, and excellent isolation between devices becomes increasingly critical. SiGe/Si modulation doped field effect transistors (MODFETs) with high carrier mobilities are currently under development to meet the active RF device needs. However, as the substrate normally used is Si, the low-to-modest substrate resistivity causes large losses in the passive elements required for a complete high frequency circuit. These losses are projected to become increasingly troublesome as device frequencies progress to the Ku-band (12 - 18 GHz) and beyond. Sapphire is an excellent substrate for high frequency SOC designs because it supports excellent both active and passive RF device performance, as well as low-power digital operations. We are developing high electron mobility SiGe/Si transistor structures on r-plane sapphire, using either in-situ grown n-MODFET structures or ion-implanted high electron mobility transistor (HEMT) structures. Advantages of the MODFET structures include high electron mobilities at all temperatures (relative to ion-implanted HEMT structures), with mobility continuously improving to cryogenic temperatures. We have measured electron mobilities over 1,200 and 13,000 sq cm/V-sec at room temperature and 0.25 K, respectively in MODFET structures. The electron carrier densities were 1.6 and 1.33 x 10(exp 12)/sq cm at room and liquid helium temperature, respectively, denoting excellent carrier confinement. Using this technique, we have observed electron mobilities as high as 900 sq cm/V-sec at room temperature at a carrier density of 1.3 x 10(exp 12)/sq cm. The temperature dependence of mobility for both the MODFET and HEMT structures provides insights into the mechanisms that allow for enhanced electron mobility as well as the processes that limit mobility, and will be presented.

  6. Traveling wave electrode design for ultra compact carrier-injection HBT-based electroabsorption modulator in a 130nm BiCMOS process

    NASA Astrophysics Data System (ADS)

    Fu, Enjin; Joyner Koomson, Valencia; Wu, Pengfei; Huang, Z. Rena

    2014-03-01

    Silicon photonic system, integrating photonic and electronic signal processing circuits in low-cost silicon CMOS processes, is a rapidly evolving area of research. The silicon electroabsorption modulator (EAM) is a key photonic device for emerging high capacity telecommunication networks to meet ever growing computing demands. To replace traditional large footprint Mach-Zehnder Interferometer (MZI) type modulators several small footprint modulators are being researched. Carrier-injection modulators can provide large free carrier density change, high modulation efficiency, and compact footprint. The large optical bandwidth and ultra-fast transit times of 130nm HBT devices make the carrierinjection HBT-based EAM (HBT-EAM) a good candidate for ultra-high-speed optical networks. This paper presents the design and 3D full-wave simulation results of a traveling wave electrode (TWE) structure to increase the modulation speed of a carrier-injection HBT-EAM device. A monolithic TWE design for an 180um ultra compact carrier-injection-based HBT-EAM implemented in a commercial 130nm SiGe BiCMOS process is discussed. The modulator is electrically modeled at the desired bias voltage and included in a 3D full-wave simulation using CST software. The simulation shows the TWE has a S11 lower than -15.31dB and a S21 better than -0.96dB covering a bandwidth from DC-60GHz. The electrical wave phase velocity is designed close to the optical wave phase velocity for optimal modulation speed. The 3D TWE design conforms to the design rules of the BiCMOS process. Simulation results show an overall increase in modulator data rate from 10Gbps to 60Gbps using the TWE structure.

  7. Very low drift and high sensitivity of nanocrystal-TiO2 sensing membrane on pH-ISFET fabricated by CMOS compatible process

    NASA Astrophysics Data System (ADS)

    Bunjongpru, W.; Sungthong, A.; Porntheeraphat, S.; Rayanasukha, Y.; Pankiew, A.; Jeamsaksiri, W.; Srisuwan, A.; Chaisriratanakul, W.; Chaowicharat, E.; Klunngien, N.; Hruanun, C.; Poyai, A.; Nukeaw, J.

    2013-02-01

    High sensitivity and very low drift rate pH sensors are successfully prepared by using nanocrystal-TiO2 as sensing membrane of ion sensitive field effect transistor (ISFET) device fabricated via CMOS process. This paper describes the physical properties and sensing characteristics of the TiO2 membrane prepared by annealing Ti and TiN thin films that deposited on SiO2/p-Si substrates through reactive DC magnetron sputtering system. The X-ray diffraction, scanning electron microscopy and Auger electron spectroscopy were used to investigate the structural and morphological features of deposited films after they had been subjected to annealing at various temperatures. The experimental results are interpreted in terms of the effects of amorphous-to-crystalline phase transition and subsequent oxidation of the annealed films. The electrolyte-insulator-semiconductor (EIS) device incorporating Tisbnd Osbnd N membrane that had been obtained by annealing of TiN thin film at 850 °C exhibited a higher sensitivity (57 mV/pH), a higher linearity (1), a lower hysteresis voltage (1 mV in the pH cycle of 7 → 4 → 7 → 10 → 7), and a smaller drift rate (0.246 mV/h) than did those devices prepared at the other annealing temperatures. Furthermore, this pH-sensing device fabrication process is fully compatible with CMOS fabrication process technology.

  8. Development of CMOS Active Pixel Image Sensors for Low Cost Commercial Applications

    NASA Technical Reports Server (NTRS)

    Fossum, E.; Gee, R.; Kemeny, S.; Kim, Q.; Mendis, S.; Nakamura, J.; Nixon, R.; Ortiz, M.; Pain, B.; Zhou, Z.; Ackland, B.; Dickinson, A.; Eid, E.; Inglis, D.

    1994-01-01

    This paper describes ongoing research and development of CMOS active pixel image sensors for low cost commercial applications. A number of sensor designs have been fabricated and tested in both p-well and n-well technologies. Major elements in the development of the sensor include on-chip analog signal processing circuits for the reduction of fixed pattern noise, on-chip timing and control circuits and on-chip analog-to-digital conversion (ADC). Recent results and continuing efforts in these areas will be presented.

  9. An On-Chip Multi-Voltage Power Converter With Leakage Current Prevention Using 0.18 μm High-Voltage CMOS Process.

    PubMed

    Lo, Yi-Kai; Chen, Kuanfu; Gad, Parag; Liu, Wentai

    2016-02-01

    In this paper, we present an on-chip multi-voltage power converter incorporating of a quad-voltage timing-control rectifier and regulators to produce ±12 V and ±1.8 V simultaneously through inductive powering. The power converter achieves a PCE of 77.3% with the delivery of more than 100 mW to the implant. The proposed rectifier adopts a two-phase start-up scheme and mixed-voltage gate controller to avoid substrate leakage current. This current cannot be prevented by the conventional dynamic substrate biasing technique when using the high-voltage CMOS process with transistor threshold voltage higher than the turn-on voltage of parasitic diodes. High power conversion efficiency is achieved by 1) substrate leakage current prevention, 2) operating all rectifying transistors as switches with boosted gate control voltages, and 3) compensating the delayed turn-on and preventing reverse leakage current of rectifying switches with the proposed look-ahead comparator. This chip occupies an area of 970 μm × 4500 μm in a 0.18 μ m 32 V HV CMOS process. The quad-voltage timing-control rectifier alone is able to output a high DC voltage at the range of [2.5 V, 25 V]. With this power converter, both bench-top experiment and in-vivo power link test using a rat model were validated. PMID:25616076

  10. An ultra-low-power area-efficient non-volatile memory in a 0.18 ?m single-poly CMOS process for passive RFID tags

    NASA Astrophysics Data System (ADS)

    Xiaoyun, Jia; Peng, Feng; Shengguang, Zhang; Nanjian, Wu; Baiqin, Zhao; Su, Liu

    2013-08-01

    This paper presents an ultra-low-power area-efficient non-volatile memory (NVM) in a 0.18 ?m single-poly standard CMOS process for passive radio frequency identification (RFID) tags. In the memory cell, a novel low-power operation method is proposed to realize bi-directional FowlerNordheim tunneling during write operation. Furthermore, the cell is designed with PMOS transistors and coupling capacitors to minimize its area. In order to improve its reliability, the cell consists of double floating gates to store the data, and the 1 kbit NVM was implemented in a 0.18 ?m single-poly standard CMOS process. The area of the memory cell and 1 kbit memory array is 96 ?m2 and 0.12 mm2, respectively. The measured results indicate that the program/erase voltage ranges from 5 to 6 V The power consumption of the read/write operation is 0.19 ?W/0.69 ?W at a read/write rate of (268 kb/s)/(3.0 kb/s).

  11. Photon counting readout pixel array in 0.18-?m CMOS technology for on-line gamma-ray imaging of 103palladium seeds for permanent breast seed implant (PBSI) brachytherapy

    NASA Astrophysics Data System (ADS)

    Goldan, A. H.; Karim, K. S.; Reznik, A.; Caldwell, C. B.; Rowlands, J. A.

    2008-03-01

    Permanent breast seed implant (PBSI) brachytherapy technique was recently introduced as an alternative to high dose rate (HDR) brachytherapy and involves the permanent implantation of radioactive 103Palladium seeds into the surgical cavity of the breast for cancer treatment. To enable accurate seed implantation, this research introduces a gamma camera based on a hybrid amorphous selenium detector and CMOS readout pixel architecture for real-time imaging of 103Palladium seeds during the PBSI procedure. A prototype chip was designed and fabricated in 0.18-?m n-well CMOS process. We present the experimental results obtained from this integrated photon counting readout pixel.

  12. Graphene/Si CMOS Hybrid Hall Integrated Circuits

    PubMed Central

    Huang, Le; Xu, Huilong; Zhang, Zhiyong; Chen, Chengying; Jiang, Jianhua; Ma, Xiaomeng; Chen, Bingyan; Li, Zishen; Zhong, Hua; Peng, Lian-Mao

    2014-01-01

    Graphene/silicon CMOS hybrid integrated circuits (ICs) should provide powerful functions which combines the ultra-high carrier mobility of graphene and the sophisticated functions of silicon CMOS ICs. But it is difficult to integrate these two kinds of heterogeneous devices on a single chip. In this work a low temperature process is developed for integrating graphene devices onto silicon CMOS ICs for the first time, and a high performance graphene/CMOS hybrid Hall IC is demonstrated. Signal amplifying/process ICs are manufactured via commercial 0.18 um silicon CMOS technology, and graphene Hall elements (GHEs) are fabricated on top of the passivation layer of the CMOS chip via a low-temperature micro-fabrication process. The sensitivity of the GHE on CMOS chip is further improved by integrating the GHE with the CMOS amplifier on the Si chip. This work not only paves the way to fabricate graphene/Si CMOS Hall ICs with much higher performance than that of conventional Hall ICs, but also provides a general method for scalable integration of graphene devices with silicon CMOS ICs via a low-temperature process. PMID:24998222

  13. Graphene/Si CMOS hybrid hall integrated circuits.

    PubMed

    Huang, Le; Xu, Huilong; Zhang, Zhiyong; Chen, Chengying; Jiang, Jianhua; Ma, Xiaomeng; Chen, Bingyan; Li, Zishen; Zhong, Hua; Peng, Lian-Mao

    2014-01-01

    Graphene/silicon CMOS hybrid integrated circuits (ICs) should provide powerful functions which combines the ultra-high carrier mobility of graphene and the sophisticated functions of silicon CMOS ICs. But it is difficult to integrate these two kinds of heterogeneous devices on a single chip. In this work a low temperature process is developed for integrating graphene devices onto silicon CMOS ICs for the first time, and a high performance graphene/CMOS hybrid Hall IC is demonstrated. Signal amplifying/process ICs are manufactured via commercial 0.18 um silicon CMOS technology, and graphene Hall elements (GHEs) are fabricated on top of the passivation layer of the CMOS chip via a low-temperature micro-fabrication process. The sensitivity of the GHE on CMOS chip is further improved by integrating the GHE with the CMOS amplifier on the Si chip. This work not only paves the way to fabricate graphene/Si CMOS Hall ICs with much higher performance than that of conventional Hall ICs, but also provides a general method for scalable integration of graphene devices with silicon CMOS ICs via a low-temperature process. PMID:24998222

  14. Graphene/Si CMOS Hybrid Hall Integrated Circuits

    NASA Astrophysics Data System (ADS)

    Huang, Le; Xu, Huilong; Zhang, Zhiyong; Chen, Chengying; Jiang, Jianhua; Ma, Xiaomeng; Chen, Bingyan; Li, Zishen; Zhong, Hua; Peng, Lian-Mao

    2014-07-01

    Graphene/silicon CMOS hybrid integrated circuits (ICs) should provide powerful functions which combines the ultra-high carrier mobility of graphene and the sophisticated functions of silicon CMOS ICs. But it is difficult to integrate these two kinds of heterogeneous devices on a single chip. In this work a low temperature process is developed for integrating graphene devices onto silicon CMOS ICs for the first time, and a high performance graphene/CMOS hybrid Hall IC is demonstrated. Signal amplifying/process ICs are manufactured via commercial 0.18 um silicon CMOS technology, and graphene Hall elements (GHEs) are fabricated on top of the passivation layer of the CMOS chip via a low-temperature micro-fabrication process. The sensitivity of the GHE on CMOS chip is further improved by integrating the GHE with the CMOS amplifier on the Si chip. This work not only paves the way to fabricate graphene/Si CMOS Hall ICs with much higher performance than that of conventional Hall ICs, but also provides a general method for scalable integration of graphene devices with silicon CMOS ICs via a low-temperature process.

  15. A 50Mbit/Sec. CMOS Video Linestore System

    NASA Astrophysics Data System (ADS)

    Jeung, Yeun C.

    1988-10-01

    This paper reports the architecture, design and test results of a CMOS single chip programmable video linestore system which has 16-bit data words with 1024 bit depth. The delay is fully programmable from 9 to 1033 samples by a 10 bit binary control word. The large 16 bit data word width makes the chip useful for a wide variety of digital video signal processing applications such as DPCM coding, High-Definition TV, and Video scramblers/descramblers etc. For those applications, the conventional large fixed-length shift register or static RAM scheme is not very popular because of its lack of versatility, high power consumption, and required support circuitry. The very high throughput of 50Mbit/sec is made possible by a highly parallel, pipelined dynamic memory architecture implemented in a 2-um N-well CMOS technology. The basic cell of the programmable video linestore chip is an four transistor dynamic RAM element. This cell comprises the majority of the chip's real estate, consumes no static power, and gives good noise immunity to the simply designed sense amplifier. The chip design was done using Bellcore's version of the MULGA virtual grid symbolic layout system. The chip contains approximately 90,000 transistors in an area of 6.5 x 7.5 square mm and the I/Os are TTL compatible. The chip is packaged in a 68-pin leadless ceramic chip carrier package.

  16. Review of radiation damage studies on DNW CMOS MAPS

    NASA Astrophysics Data System (ADS)

    Traversi, G.; Gaioni, L.; Manazza, A.; Manghisoni, M.; Ratti, L.; Re, V.; Zucca, S.; Bettarini, S.; Rizzo, G.; Morsani, F.; Bosisio, L.; Rashevskaya, I.; Cindro, V.

    2013-12-01

    Monolithic active pixel sensors fabricated in a bulk CMOS technology with no epitaxial layer and standard resistivity (10 Ω cm) substrate, featuring a deep N-well as the collecting electrode (DNW MAPS), have been exposed to γ-rays, up to a final dose of 10 Mrad (SiO2), and to neutrons from a nuclear reactor, up to a total 1 MeV neutron equivalent fluence of about 3.7 ·1013cm-2. The irradiation campaign was aimed at studying the effects of radiation on the most significant parameters of the front-end electronics and on the charge collection properties of the sensors. Device characterization has been carried out before and after irradiations. The DNW MAPS irradiated with 60Co γ-rays were also subjected to high temperature annealing (100 °C for 168 h). Measurements have been performed through a number of different techniques, including electrical characterization of the front-end electronics and of DNW diodes, laser stimulation of the sensors and tests with 55Fe and 90Sr radioactive sources. This paper reviews the measurement results, their relation with the damage mechanisms underlying performance degradation and provides a new comparison between DNW devices and MAPS fabricated in a CMOS process with high resistivity (1 kΩ cm) epitaxial layer.

  17. Buried layer/connecting layer high energy implantation for improved CMOS latch-up

    SciTech Connect

    Morris, W.; Rubin, L.; Wristers, D.

    1996-12-31

    An integrated P-Buried Layer formed by MeV ion implantation combined with a localized P-Connecting Layer has been studied for latch-up isolation improvements for advanced CMOS technology. Latch-up trigger currents have been characterized with regards to buried layer dose/energy, connecting layer dose/energy, and n-well retrograde dose. Simulation results confirmed by data indicate that P+ injection trigger currents > 450 {mu}A/{mu}m can be achieved by utilizing certain combinations of B.L./C.L. and n-well retrograde doses for n+/p+ spacings = 2.0{mu}m. The B.L./C.L. process architecture shows great promise for providing an alternative isolation technique for latch-up improvement that is easy to implement, and for eliminating the dependence on epi silicon for latch-up control.

  18. A zirconium dioxide ammonia microsensor integrated with a readout circuit manufactured using the 0.18 μm CMOS process.

    PubMed

    Lin, Guan-Ming; Dai, Ching-Liang; Yang, Ming-Zhi

    2013-01-01

    The study presents an ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated sensor chip consists of a heater, an ammonia sensor and a readout circuit. The ammonia sensor is constructed by a sensitive film and the interdigitated electrodes. The sensitive film is zirconium dioxide that is coated on the interdigitated electrodes. The heater is used to provide a working temperature to the sensitive film. A post-process is employed to remove the sacrificial layer and to coat zirconium dioxide on the sensor. When the sensitive film adsorbs or desorbs ammonia gas, the sensor produces a change in resistance. The readout circuit converts the resistance variation of the sensor into the output voltage. The experiments show that the integrated ammonia sensor has a sensitivity of 4.1 mV/ppm. PMID:23503294

  19. A 200 mV low leakage current subthreshold SRAM bitcell in a 130 nm CMOS process

    NASA Astrophysics Data System (ADS)

    Na, Bai; Baitao, Lü

    2012-06-01

    A low leakage current subthreshold SRAM in 130 nm CMOS technology is proposed for ultra low voltage (200 mV) applications. Almost all of the previous subthreshold works ignore the leakage current in both active and standby modes. To minimize leakage, a self-adaptive leakage cut off scheme is adopted in the proposed design without any extra dynamic energy dissipation or performance penalty. Combined with buffering circuit and reconfigurable operation, the proposed design ensures both read and standby stability without deteriorating writability in the subthreshold region. Compared to the referenced subthreshold SRAM bitcell, the proposed bitcell shows: (1) a better critical state noise margin, and (2) smaller leakage current in both active and standby modes. Measurement results show that the proposed SRAM functions well at a 200 mV supply voltage with 0.13 μW power consumption at 138 kHz frequency.

  20. Design of High Speed and Low Offset Dynamic Latch Comparator in 0.18 m CMOS Process

    PubMed Central

    Rahman, Labonnah Farzana; Reaz, Mamun Bin Ibne; Yin, Chia Chieu; Ali, Mohammad Alauddin Mohammad; Marufuzzaman, Mohammad

    2014-01-01

    The cross-coupled circuit mechanism based dynamic latch comparator is presented in this research. The comparator is designed using differential input stages with regenerative S-R latch to achieve lower offset, lower power, higher speed and higher resolution. In order to decrease circuit complexity, a comparator should maintain power, speed, resolution and offset-voltage properly. Simulations show that this novel dynamic latch comparator designed in 0.18 m CMOS technology achieves 3.44 mV resolution with 8 bit precision at a frequency of 50 MHz while dissipating 158.5 W from 1.8 V supply and 88.05 A average current. Moreover, the proposed design propagates as fast as 4.2 nS with energy efficiency of 0.7 fJ/conversion-step. Additionally, the core circuit layout only occupies 0.008 mm2. PMID:25299266

  1. Design of high speed and low offset dynamic latch comparator in 0.18 m CMOS process.

    PubMed

    Rahman, Labonnah Farzana; Reaz, Mamun Bin Ibne; Yin, Chia Chieu; Ali, Mohammad Alauddin Mohammad; Marufuzzaman, Mohammad

    2014-01-01

    The cross-coupled circuit mechanism based dynamic latch comparator is presented in this research. The comparator is designed using differential input stages with regenerative S-R latch to achieve lower offset, lower power, higher speed and higher resolution. In order to decrease circuit complexity, a comparator should maintain power, speed, resolution and offset-voltage properly. Simulations show that this novel dynamic latch comparator designed in 0.18 m CMOS technology achieves 3.44 mV resolution with 8 bit precision at a frequency of 50 MHz while dissipating 158.5 W from 1.8 V supply and 88.05 A average current. Moreover, the proposed design propagates as fast as 4.2 nS with energy efficiency of 0.7 fJ/conversion-step. Additionally, the core circuit layout only occupies 0.008 mm2. PMID:25299266

  2. Investigation of Output Mechanical Power Limits on High-Torque Electrostatic Actuators Using High-Frequency Complementary Metal Oxide Semiconductor (CMOS) Camera Combined with Image Processing Software

    NASA Astrophysics Data System (ADS)

    Walter, Vincent; Le Moal, Patrice; Minotti, Patrice; Joseph, Eric; Bourbon, Gilles

    2002-06-01

    The following work investigates output mechanical power limits of electrostatic micromotors using stator/rotor contact interactions. Loading characteristics of micrometer size motors monolithically coupled with elastic polysilicon torque sensors are measured through an high-frequency complementary metal oxide semiconductor (CMOS) camera combined with a specific image processing software. Short duration video sequences recorded during the rotor braking are analyzed by tracking of a target pixel attached to the tested devices. Output mechanical power limits are measured through electrostatic probing on the wafer level within a few milliseconds. Experiments point out an unusual mechanical power per mass unit which is as high as 100 W/gr, considering driving frequencies on the order of 100 kHz.

  3. Ion traps fabricated in a CMOS foundry

    SciTech Connect

    Mehta, K. K.; Ram, R. J.; Eltony, A. M.; Chuang, I. L.; Bruzewicz, C. D.; Sage, J. M. Chiaverini, J.

    2014-07-28

    We demonstrate trapping in a surface-electrode ion trap fabricated in a 90-nm CMOS (complementary metal-oxide-semiconductor) foundry process utilizing the top metal layer of the process for the trap electrodes. The process includes doped active regions and metal interconnect layers, allowing for co-fabrication of standard CMOS circuitry as well as devices for optical control and measurement. With one of the interconnect layers defining a ground plane between the trap electrode layer and the p-type doped silicon substrate, ion loading is robust and trapping is stable. We measure a motional heating rate comparable to those seen in surface-electrode traps of similar size. This demonstration of scalable quantum computing hardware utilizing a commercial CMOS process opens the door to integration and co-fabrication of electronics and photonics for large-scale quantum processing in trapped-ion arrays.

  4. Radiation tolerant back biased CMOS VLSI

    NASA Technical Reports Server (NTRS)

    Maki, Gary K. (Inventor); Gambles, Jody W. (Inventor); Hass, Kenneth J. (Inventor)

    2003-01-01

    A CMOS circuit formed in a semiconductor substrate having improved immunity to total ionizing dose radiation, improved immunity to radiation induced latch up, and improved immunity to a single event upset. The architecture of the present invention can be utilized with the n-well, p-well, or dual-well processes. For example, a preferred embodiment of the present invention is described relative to a p-well process wherein the p-well is formed in an n-type substrate. A network of NMOS transistors is formed in the p-well, and a network of PMOS transistors is formed in the n-type substrate. A contact is electrically coupled to the p-well region and is coupled to first means for independently controlling the voltage in the p-well region. Another contact is electrically coupled to the n-type substrate and is coupled to second means for independently controlling the voltage in the n-type substrate. By controlling the p-well voltage, the effective threshold voltages of the n-channel transistors both drawn and parasitic can be dynamically tuned. Likewise, by controlling the n-type substrate, the effective threshold voltages of the p-channel transistors both drawn and parasitic can also be dynamically tuned. Preferably, by optimizing the threshold voltages of the n-channel and p-channel transistors, the total ionizing dose radiation effect will be neutralized and lower supply voltages can be utilized for the circuit which would result in the circuit requiring less power.

  5. A diffractive multispectral image sensor with on- and off-die signal processing and on-die optics in 0.18-micron CMOS

    NASA Astrophysics Data System (ADS)

    Thomas, Christopher; Hornsey, Richard

    2007-02-01

    On-die optics have been proposed for imaging, spectral analysis, and communications applications. These systems typically require extra process steps to fabricate on-die optics. Fabrication of diffractive optics using the metal layers in commercial CMOS processes circumvents this requirement, but produces optical elements with poor imaging behavior. This paper discusses the application of Wiener filtering to reconstruction of images suffering from blurring and chromatic aberration, and to identification of the position and wavelength of point sources. Adaptation of this approach to analog and digital FIR implementations are discussed, and the design of a multispectral imaging sensor using analog FIR filtering is presented. Simulations indicate that off-die post-processing can determine point source wavelength to within 5% and position to within +/-0.05 radian, and resolve features 0.4 radian in size in images illuminated by white light. The analog hardware implementation is simulated to resolve features 0.4 radian in size illuminated by monochromatic light, and 0.7 radian with white light.

  6. SEMICONDUCTOR INTEGRATED CIRCUITS: A fully integrated UHF RFID reader SoC for handheld applications in the 0.18 ?m CMOS process

    NASA Astrophysics Data System (ADS)

    Jingchao, Wang; Chun, Zhang; Zhihua, Wang

    2010-08-01

    A low cost fully integrated single-chip UHF radio frequency identification (RFID) reader SoC for short distance handheld applications is presented. The SoC integrates all building blocksincluding an RF transceiver, a PLL frequency synthesizer, a digital baseband and an MCUin a 0.18 ?m CMOS process. A high-linearity RX front-end is designed to handle the large self-interferer. A class-E power amplifier with high power efficiency is also integrated to fulfill the function of a UHF passive RFID reader. The measured maximum output power of the transmitter is 20.28 dBm and the measured receiver sensitivity is -60 dBm. The digital baseband including MCU core consumes 3.91 mW with a clock of 10 MHz and the analog part including power amplifier consumes 368.4 mW. The chip has a die area of 5.1 3.8 mm2 including pads.

  7. A 0.23 pJ 11.05-bit ENOB 125-MS/s pipelined ADC in a 0.18 μm CMOS process

    NASA Astrophysics Data System (ADS)

    Yong, Wang; Jianyun, Zhang; Rui, Yin; Yuhang, Zhao; Wei, Zhang

    2015-05-01

    This paper describes a 12-bit 125-MS/s pipelined analog-to-digital converter (ADC) that is implemented in a 0.18 μm CMOS process. A gate-bootstrapping switch is used as the bottom-sampling switch in the first stage to enhance the sampling linearity. The measured differential and integral nonlinearities of the prototype are less than 0.79 least significant bit (LSB) and 0.86 LSB, respectively, at the full sampling rate. The ADC exhibits an effective number of bits (ENOB) of more than 11.05 bits at the input frequency of 10.5 MHz. The ADC also achieves a 10.5 bits ENOB with the Nyquist input frequency at the full sample rate. In addition, the ADC consumes 62 mW from a 1.9 V power supply and occupies 1.17 mm2, which includes an on-chip reference buffer. The figure-of-merit of this ADC is 0.23 pJ/step. Project supported by the Foundation of Shanghai Municipal Commission of Economy and Informatization (No. 130311).

  8. Hybrid phase-locked loop with fast locking time and low spur in a 0.18-μm CMOS process

    NASA Astrophysics Data System (ADS)

    Zhu, Si-Heng; Si, Li-Ming; Guo, Chao; Shi, Jun-Yu; Zhu, Wei-Ren

    2014-07-01

    We propose a novel hybrid phase-locked loop (PLL) architecture for overcoming the trade-off between fast locking time and low spur. To reduce the settling time and meanwhile suppress the reference spurs, we employ a wide-band single-path PLL and a narrow-band dual-path PLL in a transient state and a steady state, respectively, by changing the loop bandwidth according to the gain of voltage controlled oscillator (VCO) and the resister of the loop filter. The hybrid PLL is implemented in a 0.18-μm complementary metal oxide semiconductor (CMOS) process with a total die area of 1.4×0.46 mm2. The measured results exhibit a reference spur level of lower than -73 dB with a reference frequency of 10 MHz and a settling time of 20 μs with 40 MHz frequency jump at 2 GHz. The total power consumption of the hybrid PLL is less than 27 mW with a supply voltage of 1.8 V.

  9. A multi-mode multi-band RF receiver front-end for a TD-SCDMA/LTE/LTE-advanced in 0.18-?m CMOS process

    NASA Astrophysics Data System (ADS)

    Rui, Guo; Haiying, Zhang

    2012-09-01

    A fully integrated multi-mode multi-band directed-conversion radio frequency (RF) receiver front-end for a TD-SCDMA/LTE/LTE-advanced is presented. The front-end employs direct-conversion design, and consists of two differential tunable low noise amplifiers (LNA), a quadrature mixer, and two intermediate frequency (IF) amplifiers. The two independent tunable LNAs are used to cover all the four frequency bands, achieving sufficient low noise and high gain performance with low power consumption. Switched capacitor arrays perform a resonant frequency point calibration for the LNAs. The two LNAs are combined at the driver stage of the mixer, which employs a folded double balanced Gilbert structure, and utilizes PMOS transistors as local oscillator (LO) switches to reduce flicker noise. The front-end has three gain modes to obtain a higher dynamic range. Frequency band selection and mode of configuration is realized by an on-chip serial peripheral interface (SPI) module. The front-end is fabricated in a TSMC 0.18-?m RF CMOS process and occupies an area of 1.3 mm2. The measured double-sideband (DSB) noise figure is below 3.5 dB and the conversion gain is over 43 dB at all of the frequency bands. The total current consumption is 31 mA from a 1.8-V supply.

  10. Integrated tunable CMOS laser.

    PubMed

    Creazzo, Timothy; Marchena, Elton; Krasulick, Stephen B; Yu, Paul K L; Van Orden, Derek; Spann, John Y; Blivin, Christopher C; He, Lina; Cai, Hong; Dallesasse, John M; Stone, Robert J; Mizrahi, Amit

    2013-11-18

    An integrated tunable CMOS laser for silicon photonics, operating at the C-band, and fabricated in a commercial CMOS foundry is presented. The III-V gain medium section is embedded in the silicon chip, and is hermetically sealed. The gain section is metal bonded to the silicon substrate creating low thermal resistance into the substrate and avoiding lattice mismatch problems. Optical characterization shows high performance in terms of side mode suppression ratio, relative intensity noise, and linewidth that is narrow enough for coherent communications. PMID:24514318

  11. Lab-on-CMOS Integration of Microfluidics and Electrochemical Sensors

    PubMed Central

    Huang, Yue; Mason, Andrew J.

    2013-01-01

    This paper introduces a CMOS-microfluidics integration scheme for electrochemical microsystems. A CMOS chip was embedded into a micro-machined silicon carrier. By leveling the CMOS chip and carrier surface to within 100 nm, an expanded obstacle-free surface suitable for photolithography was achieved. Thin film metal planar interconnects were microfabricated to bridge CMOS pads to the perimeter of the carrier, leaving a flat and smooth surface for integrating microfluidic structures. A model device containing SU-8 microfluidic mixers and detection channels crossing over microelectrodes on a CMOS integrated circuit was constructed using the chip-carrier assembly scheme. Functional integrity of microfluidic structures and on-CMOS electrodes was verified by a simultaneous sample dilution and electrochemical detection experiment within multi-channel microfluidics. This lab-on-CMOS integration process is capable of high packing density, is suitable for wafer-level batch production, and opens new opportunities to combine the performance benefits of on-CMOS sensors with lab-on-chip platforms. PMID:23939616

  12. LDRD Final Report - Investigations of the impact of the process integration of deposited magnetic films for magnetic memory technologies on radiation-hardened CMOS devices and circuits - LDRD Project (FY99)

    SciTech Connect

    MYERS,DAVID R.; JESSING,JEFFREY R.; SPAHN,OLGA B.; SHANEYFELT,MARTY R.

    2000-01-01

    This project represented a coordinated LLNL-SNL collaboration to investigate the feasibility of developing radiation-hardened magnetic non-volatile memories using giant magnetoresistance (GMR) materials. The intent of this limited-duration study was to investigate whether giant magnetoresistance (GMR) materials similar to those used for magnetic tunnel junctions (MTJs) were process compatible with functioning CMOS circuits. Sandia's work on this project demonstrated that deposition of GMR materials did not affect the operation nor the radiation hardness of Sandia's rad-hard CMOS technology, nor did the integration of GMR materials and exposure to ionizing radiation affect the magnetic properties of the GMR films. Thus, following deposition of GMR films on rad-hard integrated circuits, both the circuits and the films survived ionizing radiation levels consistent with DOE mission requirements. Furthermore, Sandia developed techniques to pattern deposited GMR films without degrading the completed integrated circuits upon which they were deposited. The present feasibility study demonstrated all the necessary processing elements to allow fabrication of the non-volatile memory elements onto an existing CMOS chip, and even allow the use of embedded (on-chip) non-volatile memories for system-on-a-chip applications, even in demanding radiation environments. However, funding agencies DTRA, AIM, and DARPA did not have any funds available to support the required follow-on technology development projects that would have been required to develop functioning prototype circuits, nor were such funds available from LDRD nor from other DOE program funds.

  13. A CMOS high speed imaging system design based on FPGA

    NASA Astrophysics Data System (ADS)

    Tang, Hong; Wang, Huawei; Cao, Jianzhong; Qiao, Mingrui

    2015-10-01

    CMOS sensors have more advantages than traditional CCD sensors. The imaging system based on CMOS has become a hot spot in research and development. In order to achieve the real-time data acquisition and high-speed transmission, we design a high-speed CMOS imaging system on account of FPGA. The core control chip of this system is XC6SL75T and we take advantages of CameraLink interface and AM41V4 CMOS image sensors to transmit and acquire image data. AM41V4 is a 4 Megapixel High speed 500 frames per second CMOS image sensor with global shutter and 4/3" optical format. The sensor uses column parallel A/D converters to digitize the images. The CameraLink interface adopts DS90CR287 and it can convert 28 bits of LVCMOS/LVTTL data into four LVDS data stream. The reflected light of objects is photographed by the CMOS detectors. CMOS sensors convert the light to electronic signals and then send them to FPGA. FPGA processes data it received and transmits them to upper computer which has acquisition cards through CameraLink interface configured as full models. Then PC will store, visualize and process images later. The structure and principle of the system are both explained in this paper and this paper introduces the hardware and software design of the system. FPGA introduces the driven clock of CMOS. The data in CMOS is converted to LVDS signals and then transmitted to the data acquisition cards. After simulation, the paper presents a row transfer timing sequence of CMOS. The system realized real-time image acquisition and external controls.

  14. A 128 x 128 CMOS Active Pixel Image Sensor for Highly Integrated Imaging Systems

    NASA Technical Reports Server (NTRS)

    Mendis, Sunetra K.; Kemeny, Sabrina E.; Fossum, Eric R.

    1993-01-01

    A new CMOS-based image sensor that is intrinsically compatible with on-chip CMOS circuitry is reported. The new CMOS active pixel image sensor achieves low noise, high sensitivity, X-Y addressability, and has simple timing requirements. The image sensor was fabricated using a 2 micrometer p-well CMOS process, and consists of a 128 x 128 array of 40 micrometer x 40 micrometer pixels. The CMOS image sensor technology enables highly integrated smart image sensors, and makes the design, incorporation and fabrication of such sensors widely accessible to the integrated circuit community.

  15. An advanced, radiation hardened bulk CMOS/LSI technology

    NASA Technical Reports Server (NTRS)

    Schroeder, J. E.; Lichtel, R. L.; Gingerich, B. L.

    1981-01-01

    An advanced, second generation, bulk, Si-gate CMOS process is described. This process is capable of producing LSI and VLSI parts that are latch-up free and hardened to total dose levels in excess of 2 x 10 to the 5th rad-Si for applications in space and weapons radiation environments. Two memories designed to use this process are also described. Both circuits are 4096-bit, static CMOS RAMs.

  16. Ink-Jet Printed CMOS Electronics from Oxide Semiconductors.

    PubMed

    Garlapati, Suresh Kumar; Baby, Tessy Theres; Dehm, Simone; Hammad, Mohammed; Chakravadhanula, Venkata Sai Kiran; Kruk, Robert; Hahn, Horst; Dasgupta, Subho

    2015-08-01

    Complementary metal oxide semiconductor (CMOS) technology with high transconductance and signal gain is mandatory for practicable digital/analog logic electronics. However, high performance all-oxide CMOS logics are scarcely reported in the literature; specifically, not at all for solution-processed/printed transistors. As a major step toward solution-processed all-oxide electronics, here it is shown that using a highly efficient electrolyte-gating approach one can obtain printed and low-voltage operated oxide CMOS logics with high signal gain (≈21 at a supply voltage of only 1.5 V) and low static power dissipation. PMID:25867029

  17. All-CMOS night vision viewer with integrated microdisplay

    NASA Astrophysics Data System (ADS)

    Goosen, Marius E.; Venter, Petrus J.; du Plessis, Monuko; Faure, Nicolaas M.; Janse van Rensburg, Christo; Rademeyer, Pieter

    2014-02-01

    The unrivalled integration potential of CMOS has made it the dominant technology for digital integrated circuits. With the advent of visible light emission from silicon through hot carrier electroluminescence, several applications arose, all of which rely upon the advantages of mature CMOS technologies for a competitive edge in a very active and attractive market. In this paper we present a low-cost night vision viewer which employs only standard CMOS technologies. A commercial CMOS imager is utilized for near infrared image capturing with a 128x96 pixel all-CMOS microdisplay implemented to convey the image to the user. The display is implemented in a standard 0.35 ?m CMOS process, with no process alterations or post processing. The display features a 25 ?m pixel pitch and a 3.2 mm x 2.4 mm active area, which through magnification presents the virtual image to the user equivalent of a 19-inch display viewed from a distance of 3 meters. This work represents the first application of a CMOS microdisplay in a low-cost consumer product.

  18. Theoretical performance analysis for CMOS based high resolution detectors

    PubMed Central

    Jain, Amit; Bednarek, Daniel R.; Rudin, Stephen

    2013-01-01

    High resolution imaging capabilities are essential for accurately guiding successful endovascular interventional procedures. Present x-ray imaging detectors are not always adequate due to their inherent limitations. The newly-developed high-resolution micro-angiographic fluoroscope (MAF-CCD) detector has demonstrated excellent clinical image quality; however, further improvement in performance and physical design may be possible using CMOS sensors. We have thus calculated the theoretical performance of two proposed CMOS detectors which may be used as a successor to the MAF. The proposed detectors have a 300 ?m thick HL-type CsI phosphor, a 50 ?m-pixel CMOS sensor with and without a variable gain light image intensifier (LII), and are designated MAF-CMOS-LII and MAF-CMOS, respectively. For the performance evaluation, linear cascade modeling was used. The detector imaging chains were divided into individual stages characterized by one of the basic processes (quantum gain, binomial selection, stochastic and deterministic blurring, additive noise). Ranges of readout noise and exposure were used to calculate the detectors MTF and DQE. The MAF-CMOS showed slightly better MTF than the MAF-CMOS-LII, but the MAF-CMOS-LII showed far better DQE, especially for lower exposures. The proposed detectors can have improved MTF and DQE compared with the present high resolution MAF detector. The performance of the MAF-CMOS is excellent for the angiography exposure range; however it is limited at fluoroscopic levels due to additive instrumentation noise. The MAF-CMOS-LII, having the advantage of the variable LII gain, can overcome the noise limitation and hence may perform exceptionally for the full range of required exposures; however, it is more complex and hence more expensive. PMID:24353390

  19. Fully CMOS-compatible titanium nitride nanoantennas

    NASA Astrophysics Data System (ADS)

    Briggs, Justin A.; Naik, Gururaj V.; Petach, Trevor A.; Baum, Brian K.; Goldhaber-Gordon, David; Dionne, Jennifer A.

    2016-02-01

    CMOS-compatible fabrication of plasmonic materials and devices will accelerate the development of integrated nanophotonics for information processing applications. Using low-temperature plasma-enhanced atomic layer deposition (PEALD), we develop a recipe for fully CMOS-compatible titanium nitride (TiN) that is plasmonic in the visible and near infrared. Films are grown on silicon, silicon dioxide, and epitaxially on magnesium oxide substrates. By optimizing the plasma exposure per growth cycle during PEALD, carbon and oxygen contamination are reduced, lowering undesirable loss. We use electron beam lithography to pattern TiN nanopillars with varying diameters on silicon in large-area arrays. In the first reported single-particle measurements on plasmonic TiN, we demonstrate size-tunable darkfield scattering spectroscopy in the visible and near infrared regimes. The optical properties of this CMOS-compatible material, combined with its high melting temperature and mechanical durability, comprise a step towards fully CMOS-integrated nanophotonic information processing.

  20. A low leakage power-rail ESD detection circuit with a modified RC network for a 90-nm CMOS process

    NASA Astrophysics Data System (ADS)

    Zhaonian, Yang; Hongxia, Liu; Shulong, Wang

    2013-04-01

    An electrostatic discharge (ESD) detection circuit with a modified RC network for a 90-nm process clamp circuit is proposed. The leakage current is reduced to 4.6 nA at 25 °C. Under the ESD event, it injects a 38.7 mA trigger current into the P-substrate to trigger SCR, and SCR can be turned on the discharge of the ESD energy. The capacitor area used is only 4.2 μm2. The simulation result shows that the proposed circuit can save power consumption and layout area when achieving the same trigger efficiency, compared with the previous circuits.

  1. Monolithic CMUT on CMOS Integration for Intravascular Ultrasound Applications

    PubMed Central

    Zahorian, Jaime; Hochman, Michael; Xu, Toby; Satir, Sarp; Gurun, Gokce; Karaman, Mustafa; Degertekin, F. Levent

    2012-01-01

    One of the most important promises of capacitive micromachined ultrasonic transducer (CMUT) technology is integration with electronics. This approach is required to minimize the parasitic capacitances in the receive mode, especially in catheter based volumetric imaging arrays where the elements need to be small. Furthermore, optimization of the available silicon area and minimized number of connections occurs when the CMUTs are fabricated directly above the associated electronics. Here, we describe successful fabrication and performance evaluation of CMUT arrays for intravascular imaging on custom designed CMOS receiver electronics from a commercial IC foundry. The CMUT on CMOS process starts with surface isolation and mechanical planarization of the CMOS electronics to reduce topography. The rest of the CMUT fabrication is achieved by modifying a low temperature micromachining process through the addition of a single mask and developing a dry etching step to produce sloped sidewalls for simple and reliable CMUT to CMOS interconnection. This CMUT to CMOS interconnect method reduced the parasitic capacitance by a factor of 200 when compared with a standard wire bonding method. Characterization experiments indicate that the CMUT on CMOS elements are uniform in frequency response and are similar to CMUTs simultaneously fabricated on standard silicon wafers without electronics integration. Experiments on a 1.6 mm diameter dual-ring CMUT array with a 15 MHz center frequency show that both the CMUTs and the integrated CMOS electronics are fully functional. The SNR measurements indicate that the performance is adequate for imaging CTOs located 1 cm away from the CMUT array. PMID:23443701

  2. Integrated CMOS RF amplifier

    NASA Technical Reports Server (NTRS)

    Charity, C.; Whitaker, S.; Purviance, J.; Canaris, M.

    1990-01-01

    This paper reports an integrated 2.0 micron CMOS RF amplifier designed for amplification in the 420-450 MHz frequency band. Design techniques are shown for the test amplifier configuration. Problems of decreased amplifier bandwidth, gain element instability, and low Q values for the inductors were encountered. Techniques used to overcome these problems are discussed. Layouts of the various elements are described and a summary of the simulation results are included. Test circuits have been submitted to MOSIS for fabrication.

  3. Low-Power SOI CMOS Transceiver

    NASA Technical Reports Server (NTRS)

    Fujikawa, Gene (Technical Monitor); Cheruiyot, K.; Cothern, J.; Huang, D.; Singh, S.; Zencir, E.; Dogan, N.

    2003-01-01

    The work aims at developing a low-power Silicon on Insulator Complementary Metal Oxide Semiconductor (SOI CMOS) Transceiver for deep-space communications. RF Receiver must accomplish the following tasks: (a) Select the desired radio channel and reject other radio signals, (b) Amplify the desired radio signal and translate them back to baseband, and (c) Detect and decode the information with Low BER. In order to minimize cost and achieve high level of integration, receiver architecture should use least number of external filters and passive components. It should also consume least amount of power to minimize battery cost, size, and weight. One of the most stringent requirements for deep-space communication is the low-power operation. Our study identified that two candidate architectures listed in the following meet these requirements: (1) Low-IF receiver, (2) Sub-sampling receiver. The low-IF receiver uses minimum number of external components. Compared to Zero-IF (Direct conversion) architecture, it has less severe offset and flicker noise problems. The Sub-sampling receiver amplifies the RF signal and samples it using track-and-hold Subsampling mixer. These architectures provide low-power solution for the short- range communications missions on Mars. Accomplishments to date include: (1) System-level design and simulation of a Double-Differential PSK receiver, (2) Implementation of Honeywell SOI CMOS process design kit (PDK) in Cadence design tools, (3) Design of test circuits to investigate relationships between layout techniques, geometry, and low-frequency noise in SOI CMOS, (4) Model development and verification of on-chip spiral inductors in SOI CMOS process, (5) Design/implementation of low-power low-noise amplifier (LNA) and mixer for low-IF receiver, and (6) Design/implementation of high-gain LNA for sub-sampling receiver. Our initial results show that substantial improvement in power consumption is achieved using SOI CMOS as compared to standard CMOS process. Potential advantages of SOI CMOS for deep-space communication electronics include: (1) Radiation hardness, (2) Low-power operation, and (3) System-on-Chip (SOC) solutions.

  4. A CMOS Smart Thermal Sensor for Biomedical Application

    NASA Astrophysics Data System (ADS)

    Lee, Ho-Yin; Chen, Shih-Lun; Luo, Ching-Hsing

    This paper describes a smart thermal sensing chip with an integrated vertical bipolar transistor sensor, a Sigma Delta Modulator (SDM), a Micro-Control Unit (MCU), and a bandgap reference voltage generator for biomedical application by using 0.18?m CMOS process. The npn bipolar transistors with the Deep N-Well (DNW) instead of the pnp bipolar transistor is first adopted as the sensor for good isolation from substrate coupling noise. In addition to data compression, Micro-Control Unit (MCU) plays an important role for executing auto-calibration by digitally trimming the bipolar sensor in parallel to save power consumption and to reduce feedback complexity. It is different from the present analog feedback calibration technologies. Using one sensor, instead of two sensors, to create two differential signals in 180 phase difference input to SDM is also a novel design of this work. As a result, in the range of 0C to 80C or body temperature (375C), the inaccuracy is less than 0.1C or 0.05C respectively with one-point calibration after packaging. The average power consumption is 268.4?W with 1.8V supply voltage.

  5. A 16-channel CMOS preamplifier for laser ranging radar receivers

    NASA Astrophysics Data System (ADS)

    Liu, Ru-qing; Zhu, Jing-guo; Jiang, Yan; Li, Meng-lin; Li, Feng

    2015-10-01

    A 16-channal front-end preamplifier array has been design in a 0.18um CMOS process for pulse Laser ranging radar receiver. This front-end preamplifier array incorporates transimpedance amplifiers(TIAs) and differential voltage post-amplifier(PAMP),band gap reference and other interface circuits. In the circuit design, the regulated cascade (RGC) input stage, Cherry-Hooper and active inductor peaking were employed to enhance the bandwidth. And in the layout design, by applying the layout isolation structure combined with P+ guard-ring(PGR), N+ guard-ring(NGR),and deep-n-well(DNW) for amplifier array, the crosstalk and the substrate noise coupling was reduced effectively. The simulations show that a single channel receiver front-end preamplifier achieves 95 dBΩ transimpedance gain and 600MHz bandwidth for 3 PF photodiode capacitance. The total power of 16-channel front-end amplifier array is about 800mW for 1.8V supply.

  6. CMOS MEMS capacitive absolute pressure sensor

    NASA Astrophysics Data System (ADS)

    Narducci, M.; Yu-Chia, L.; Fang, W.; Tsai, J.

    2013-05-01

    This paper presents the design, fabrication and characterization of a capacitive pressure sensor using a commercial 0.18 m CMOS (complementary metal-oxide-semiconductor) process and postprocess. The pressure sensor is capacitive and the structure is formed by an Al top electrode enclosed in a suspended SiO2 membrane, which acts as a movable electrode against a bottom or stationary Al electrode fixed on the SiO2 substrate. Both the movable and fixed electrodes form a variable parallel plate capacitor, whose capacitance varies with the applied pressure on the surface. In order to release the membranes the CMOS layers need to be applied postprocess and this mainly consists of four steps: (1) deposition and patterning of PECVD (plasma-enhanced chemical vapor deposition) oxide to protect CMOS pads and to open the pressure sensor top surface, (2) etching of the sacrificial layer to release the suspended membrane, (3) deposition of PECVD oxide to seal the etching holes and creating vacuum inside the gap, and finally (4) etching of the passivation oxide to open the pads and allow electrical connections. This sensor design and fabrication is suitable to obey the design rules of a CMOS foundry and since it only uses low-temperature processes, it allows monolithic integration with other types of CMOS compatible sensors and IC (integrated circuit) interface on a single chip. Experimental results showed that the pressure sensor has a highly linear sensitivity of 0.14 fF kPa-1 in the pressure range of 0-300 kPa.

  7. Advancement of CMOS Doping Technology in an External Development Framework

    NASA Astrophysics Data System (ADS)

    Jain, Amitabh; Chambers, James J.; Shaw, Judy B.

    2011-01-01

    The consumer appetite for a rich multimedia experience drives technology development for mobile hand-held devices and the infrastructure to support them. Enhancements in functionality, speed, and user experience are derived from advancements in CMOS technology. The technical challenges in developing each successive CMOS technology node to support these enhancements have become increasingly difficult. These trends have motivated the CMOS business towards a collaborative approach based on strategic partnerships. This paper describes our model and experience of CMOS development, based on multi-dimensional industrial and academic partnerships. We provide to our process equipment, materials, and simulation partners, as well as to our silicon foundry partners, the detailed requirements for future integrated circuit products. This is done very early in the development cycle to ensure that these requirements can be met. In order to determine these fundamental requirements, we rely on a strategy that requires strong interaction between process and device simulation, physical and chemical analytical methods, and research at academic institutions. This learning is shared with each project partner to address integration and manufacturing issues encountered during CMOS technology development from its inception through product ramp. We utilize TI's core strengths in physical analysis, unit processes and integration, yield ramp, reliability, and product engineering to support this technological development. Finally, this paper presents examples of the advancement of CMOS doping technology for the 28 nm node and beyond through this development model.

  8. Interferometric comparison of the performance of a CMOS and sCMOS detector

    NASA Astrophysics Data System (ADS)

    Flores-Moreno, J. M.; De la Torre I., Manuel H.; Hernndez-Montes, M. S.; Prez-Lpez, Carlos; Mendoza S., Fernando

    2015-08-01

    We present an analysis of the imaging performance of two state-of-the-art sensors widely used in the nondestructive- testing area (NDT). The analysis is based on the quantification of the signal-to-noise (SNR) ratio from an optical phase image. The calculation of the SNR is based on the relation of the median (average) and standard deviation measurements over specific areas of interest in the phase images of both sensors. This retrieved phase is coming from the vibrational behavior of a large object by means of an out-of-plane holographic interferometer. The SNR is used as a figure-of-merit to evaluate and compare the performance of the CMOS and scientific CMOS (sCMOS) camera as part of the experimental set-up. One of the cameras has a high speed CMOS sensor while the other has a high resolution sCMOS sensor. The object under study is a metallically framed table with a Formica cover with an observable area of 1.1 m2. The vibration induced to the sample is performed by a linear step motor with an attached tip in the motion stage. Each camera is used once at the time to record the deformation keeping the same experimental conditions for each case. These measurements may complement the conventional procedures or technical information commonly used to evaluate a camers performance such as: quantum efficiency, spatial resolution and others. Results present post processed images from both cameras, but showing a smoother and easy to unwrap optical phase coming from those recorded with the sCMOS camera.

  9. A safety monitoring system for taxi based on CMOS imager

    NASA Astrophysics Data System (ADS)

    Liu, Zhi

    2005-01-01

    CMOS image sensors now become increasingly competitive with respect to their CCD counterparts, while adding advantages such as no blooming, simpler driving requirements and the potential of on-chip integration of sensor, analogue circuitry, and digital processing functions. A safety monitoring system for taxi based on cmos imager that can record field situation when unusual circumstance happened is described in this paper. The monitoring system is based on a CMOS imager (OV7120), which can output digital image data through parallel pixel data port. The system consists of a CMOS image sensor, a large capacity NAND FLASH ROM, a USB interface chip and a micro controller (AT90S8515). The structure of whole system and the test data is discussed and analyzed in detail.

  10. SOI-CMOS-MEMS electrothermal micromirror arrays

    NASA Astrophysics Data System (ADS)

    Gilgunn, Peter J.

    A fabrication technology called SOI-CMOS-MEMS is developed to realize arrays of electrothermally actuated micromirror arrays with fill factors up to 90% and mechanical scan ranges up to +/-45. SOI-CMOS-MEMS features bonding of a CMOS-MEMS folded electrothermal actuator chip with a SOI mirror chip. Actuators and micromirrors are separately released using Bosch-type and isotropic Si etch processes. A 1-D, 3 x 3 SOI-CMOS-MEMS mirror array is characterized at a 1 mm scale that meets fill factor and scan range targets with a power sensitivity of 1.9 degm W-1 and -0.9 degm W-1 on inner and outer actuator legs, respectively. Issues preventing fabrication of SOI-CMOS-MEMS micromirror arrays designed for 1-D and 3-D motion at scales from 500 microm to 50 microm are discussed. Electrothermomechanical analytic models of power response of a generic folded actuator topology are developed that provide insight into the trends in actuator behavior for actuator design elements such as beam geometry and heater type, among others. Adverse power and scan range scaling and favorable speed scaling are demonstrated. Mechanical constraints on device geometry are derived. Detailed material, process, test structure and device characterization is presented that demonstrates the consistency of measured device behavior with analytic models. A unified model for aspect ratio dependent etch modulation is developed that achieves depth prediction accuracy of better than 10% up to 160 microm depth over a range of feature shapes and dimensions. The technique is applied extensively in the SOI-CMOS-MEMS process to produce deep multi-level structures in Si with a single etch mask and to control uniformity and feature profiles. TiW attack during release etch is shown to be the driving factor in mirror coplanarity loss. The effect is due to thermally accelerated etching caused by heating of released structures by the exothermic reaction of Si and F. The effect is quantified using in situ infrared imaging. Models are developed that predict suspended device temperatures based on a power balance model using a single parameter, the proportion of etch heat carried away by volatile species, as the sole fitting parameter.

  11. Regenerative switching CMOS system

    DOEpatents

    Welch, James D.

    1998-01-01

    Complementary Metal Oxide Semiconductor (CMOS) Schottky barrier Field Effect Transistor systems, which are a seriesed combination of N and P-Channel MOSFETS, in which Source Schottky barrier junctions of the N and P-Channel Schottky barrier MOSFETS are electically interconnected, (rather than the Drains as in conventional diffused junction CMOS), which Schottky barrier MOSFET system demonstrates Regenerative Inverting Switching Characteristics in use are disclosed. Both the N and P-Channel Schottky barrier MOSFET devices are unique in that they provide operational Drain Current vs. Drain to Source voltage as a function of Gate voltage only where the polarities of the Drain voltage and Gate voltage are opposite, referenced to the Source as a common terminal, and where the polarity of the voltage applied to the Gate is appropriate to cause Channel inversion. Experimentally derived results which demonstrate and verify the operation of N and P-Channel Schottky barrier MOSFETS actually fabricated on P and N-type Silicon respectively, by a common procedure using vacuum deposited Chromium as a Schottky barrier forming metal, are also provided.

  12. Regenerative switching CMOS system

    DOEpatents

    Welch, J.D.

    1998-06-02

    Complementary Metal Oxide Semiconductor (CMOS) Schottky barrier Field Effect Transistor systems, which are a series combination of N and P-Channel MOSFETS, in which Source Schottky barrier junctions of the N and P-Channel Schottky barrier MOSFETS are electrically interconnected, (rather than the Drains as in conventional diffused junction CMOS), which Schottky barrier MOSFET system demonstrates Regenerative Inverting Switching Characteristics in use are disclosed. Both the N and P-Channel Schottky barrier MOSFET devices are unique in that they provide operational Drain Current vs. Drain to Source voltage as a function of Gate voltage only where the polarities of the Drain voltage and Gate voltage are opposite, referenced to the Source as a common terminal, and where the polarity of the voltage applied to the Gate is appropriate to cause Channel inversion. Experimentally derived results which demonstrate and verify the operation of N and P-Channel Schottky barrier MOSFETS actually fabricated on P and N-type Silicon respectively, by a common procedure using vacuum deposited Chromium as a Schottky barrier forming metal, are also provided. 14 figs.

  13. Advanced CMOS Radiation Effects Testing and Analysis

    NASA Technical Reports Server (NTRS)

    Pellish, J. A.; Marshall, P. W.; Rodbell, K. P.; Gordon, M. S.; LaBel, K. A.; Schwank, J. R.; Dodds, N. A.; Castaneda, C. M.; Berg, M. D.; Kim, H. S.; Phan, A. M.; Seidleck, C. M.

    2014-01-01

    Presentation at the annual NASA Electronic Parts and Packaging (NEPP) Program Electronic Technology Workshop (ETW). The material includes an update of progress in this NEPP task area over the past year, which includes testing, evaluation, and analysis of radiation effects data on the IBM 32 nm silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) process. The testing was conducted using test vehicles supplied by directly by IBM.

  14. Advanced CMOS Radiation Effects Testing Analysis

    NASA Technical Reports Server (NTRS)

    Pellish, Jonathan Allen; Marshall, Paul W.; Rodbell, Kenneth P.; Gordon, Michael S.; LaBel, Kenneth A.; Schwank, James R.; Dodds, Nathaniel A.; Castaneda, Carlos M.; Berg, Melanie D.; Kim, Hak S.; Phan, Anthony M.; Seidleck, Christina M.

    2014-01-01

    Presentation at the annual NASA Electronic Parts and Packaging (NEPP) Program Electronic Technology Workshop (ETW). The material includes an update of progress in this NEPP task area over the past year, which includes testing, evaluation, and analysis of radiation effects data on the IBM 32 nm silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) process. The testing was conducted using test vehicles supplied by directly by IBM.

  15. Ultralow-Loss CMOS Copper Plasmonic Waveguides.

    PubMed

    Fedyanin, Dmitry Yu; Yakubovsky, Dmitry I; Kirtaev, Roman V; Volkov, Valentyn S

    2016-01-13

    Surface plasmon polaritons can give a unique opportunity to manipulate light at a scale well below the diffraction limit reducing the size of optical components down to that of nanoelectronic circuits. At the same time, plasmonics is mostly based on noble metals, which are not compatible with microelectronics manufacturing technologies. This prevents plasmonic components from integration with both silicon photonics and silicon microelectronics. Here, we demonstrate ultralow-loss copper plasmonic waveguides fabricated in a simple complementary metal-oxide semiconductor (CMOS) compatible process, which can outperform gold plasmonic waveguides simultaneously providing long (>40 ?m) propagation length and deep subwavelength (??(2)/50, where ? is the free-space wavelength) mode confinement in the telecommunication spectral range. These results create the backbone for the development of a CMOS plasmonic platform and its integration in future electronic chips. PMID:26654281

  16. Surface enhanced biodetection on a CMOS biosensor chip

    NASA Astrophysics Data System (ADS)

    Belloni, Federico; Sandeau, Laure; Conti, Sylvain; Vicaire, Florence; Owens, Roisin; Rigneault, Herv

    2012-03-01

    We present a rigorous electromagnetic theory of the electromagnetic power emitted by a dipole located in the vicinity of a multilayer stack. We applied this formalism to a luminescent molecule attached to a CMOS photodiode surface and report light collection efficiency larger than 80% toward the CMOS silicon substrate. We applied this result to the development of a low-cost, simple, portable device based on CMOS photodiodes technology for the detection and quantification of biological targets through light detection, presenting high sensitivity, multiplex ability, and fast data processing. The key feature of our approach is to perform the analytical test directly on the CMOS sensor surface, improving dramatically the optical detection of the molecule emitted light into the high refractive index semiconductor CMOS material. Based on adequate surface chemistry modifications, probe spotting and micro-fluidics, we performed proof-of-concept bio-assays directed against typical immuno-markers (TNF-? and IFN-?). We compared the developed CMOS chip with a commercial micro-plate reader and found similar intrinsic sensitivities in the pg/ml range.

  17. A CMOS clock and data recovery circuit for intraocular microsystems.

    PubMed

    Prmassing, F; Pttjer, D; Buss, R; Jger, D

    2002-01-01

    This paper presents the implementation of a clock and data recovery circuit (CDR) for intraocular microsystems. The CDR was designed to minimize chip area and power consumption and to recover the clock and data signals from the incoming data stream. Since the CDR has been designed without any external components it is well suited for being integrated in an intraocular microsystem. Simulation results show that this CDR works with power dissipation of less than 2.4 mW with a single 3.3 V power supply. The simulations are based on a 0.6 micron n-well CMOS single-polysilicon, three-metal technology. PMID:12451805

  18. A photovoltaic-driven and energy-autonomous CMOS implantable sensor.

    PubMed

    Ayazian, Sahar; Akhavan, Vahid A; Soenen, Eric; Hassibi, Arjang

    2012-08-01

    An energy-autonomous, photovoltaic (PV)-driven and MRI-compatible CMOS implantable sensor is presented. On-chip P+/N-well diode arrays are used as CMOS-compatible PV cells to harvest ?W's of power from the light that penetrates into the tissue. In this 2.5 mm 2.5 mm sub-?W integrated system, the in-vivo physiological signals are first measured by using a subthreshold ring oscillator-based sensor, the acquired data is then modulated into a frequency-shift keying (FSK) signal, and finally transmitted neuromorphically to the skin surface by using a pair of polarized electrodes. PMID:23853178

  19. Design and Fabrication of Vertically-Integrated CMOS Image Sensors

    PubMed Central

    Skorka, Orit; Joseph, Dileepan

    2011-01-01

    Technologies to fabricate integrated circuits (IC) with 3D structures are an emerging trend in IC design. They are based on vertical stacking of active components to form heterogeneous microsystems. Electronic image sensors will benefit from these technologies because they allow increased pixel-level data processing and device optimization. This paper covers general principles in the design of vertically-integrated (VI) CMOS image sensors that are fabricated by flip-chip bonding. These sensors are composed of a CMOS die and a photodetector die. As a specific example, the paper presents a VI-CMOS image sensor that was designed at the University of Alberta, and fabricated with the help of CMC Microsystems and Micralyne Inc. To realize prototypes, CMOS dies with logarithmic active pixels were prepared in a commercial process, and photodetector dies with metal-semiconductor-metal devices were prepared in a custom process using hydrogenated amorphous silicon. The paper also describes a digital camera that was developed to test the prototype. In this camera, scenes captured by the image sensor are read using an FPGA board, and sent in real time to a PC over USB for data processing and display. Experimental results show that the VI-CMOS prototype has a higher dynamic range and a lower dark limit than conventional electronic image sensors. PMID:22163860

  20. A Pixel Readout Chip in 40 nm CMOS Process for High Count Rate Imaging Systems with Minimization of Charge Sharing Effects

    SciTech Connect

    Maj, Piotr; Grybos, P.; Szczgiel, R.; Kmon, P.; Drozd, A.; Deptuch, G.

    2013-11-07

    We present a prototype chip in 40 nm CMOS technology for readout of hybrid pixel detector. The prototype chip has a matrix of 18x24 pixels with a pixel pitch of 100 ?m. It can operate both in single photon counting (SPC) mode and in C8P1 mode. In SPC the measured ENC is 84 e? rms (for the peaking time of 48 ns), while the effective offset spread is below 2 mV rms. In the C8P1 mode the chip reconstructs full charge deposited in the detector, even in the case of charge sharing, and it identifies a pixel with the largest charge deposition. The chip architecture and preliminary measurements are reported.

  1. Monolithic CMUT-on-CMOS integration for intravascular ultrasound applications.

    PubMed

    Zahorian, Jaime; Hochman, Michael; Xu, Toby; Satir, Sarp; Gurun, Gokce; Karaman, Mustafa; Degertekin, F Levent

    2011-12-01

    One of the most important promises of capacitive micromachined ultrasonic transducer (CMUT) technology is integration with electronics. This approach is required to minimize the parasitic capacitances in the receive mode, especially in catheter-based volumetric imaging arrays, for which the elements must be small. Furthermore, optimization of the available silicon area and minimized number of connections occurs when the CMUTs are fabricated directly above the associated electronics. Here, we describe successful fabrication and performance evaluation of CMUT arrays for intravascular imaging on custom-designed CMOS receiver electronics from a commercial IC foundry. The CMUT-on-CMOS process starts with surface isolation and mechanical planarization of the CMOS electronics to reduce topography. The rest of the CMUT fabrication is achieved by modifying a low-temperature micromachining process through the addition of a single mask and developing a dry etching step to produce sloped sidewalls for simple and reliable CMUT-to-CMOS interconnection. This CMUT-to-CMOS interconnect method reduced the parasitic capacitance by a factor of 200 when compared with a standard wire-bonding method. Characterization experiments indicate that the CMUT-on-CMOS elements are uniform in frequency response and are similar to CMUTs simultaneously fabricated on standard silicon wafers without electronics integration. Ex- periments on a 1.6-mm-diameter dual-ring CMUT array with a center frequency of 15 MHz show that both the CMUTs and the integrated CMOS electronics are fully functional. The SNR measurements indicate that the performance is adequate for imaging chronic total occlusions located 1 cm from the CMUT array. PMID:23443701

  2. Current-mode CMOS hybrid image sensor

    NASA Astrophysics Data System (ADS)

    Benyhesan, Mohammad Kassim

    Digital imaging is growing rapidly making Complimentary Metal-Oxide-Semi conductor (CMOS) image sensor-based cameras indispensable in many modern life devices like cell phones, surveillance devices, personal computers, and tablets. For various purposes wireless portable image systems are widely deployed in many indoor and outdoor places such as hospitals, urban areas, streets, highways, forests, mountains, and towers. However, the increased demand on high-resolution image sensors and improved processing features is expected to increase the power consumption of the CMOS sensor-based camera systems. Increased power consumption translates into a reduced battery life-time. The increased power consumption might not be a problem if there is access to a nearby charging station. On the other hand, the problem arises if the image sensor is located in widely spread areas, unfavorable to human intervention, and difficult to reach. Given the limitation of energy sources available for wireless CMOS image sensor, an energy harvesting technique presents a viable solution to extend the sensor life-time. Energy can be harvested from the sun light or the artificial light surrounding the sensor itself. In this thesis, we propose a current-mode CMOS hybrid image sensor capable of energy harvesting and image capture. The proposed sensor is based on a hybrid pixel that can be programmed to perform the task of an image sensor and the task of a solar cell to harvest energy. The basic idea is to design a pixel that can be configured to exploit its internal photodiode to perform two functions: image sensing and energy harvesting. As a proof of concept a 40 x 40 array of hybrid pixels has been designed and fabricated in a standard 0.5 microm CMOS process. Measurement results show that up to 39 microW of power can be harvested from the array under 130 Klux condition with an energy efficiency of 220 nJ /pixel /frame. The proposed image sensor is a current-mode image sensor which has several advantages over the voltage-mode. The most important advantages of using current-mode technique are: reduced power consumption of the chip, ease of arithmetic operations implementation, simplification of the circuit design and hence reduced layout complexity.

  3. A CMOS humidity sensor for passive RFID sensing applications.

    PubMed

    Deng, Fangming; He, Yigang; Zhang, Chaolong; Feng, Wei

    2014-01-01

    This paper presents a low-cost low-power CMOS humidity sensor for passive RFID sensing applications. The humidity sensing element is implemented in standard CMOS technology without any further post-processing, which results in low fabrication costs. The interface of this humidity sensor employs a PLL-based architecture transferring sensor signal processing from the voltage domain to the frequency domain. Therefore this architecture allows the use of a fully digital circuit, which can operate on ultra-low supply voltage and thus achieves low-power consumption. The proposed humidity sensor has been fabricated in the TSMC 0.18 ?m CMOS process. The measurements show this humidity sensor exhibits excellent linearity and stability within the relative humidity range. The sensor interface circuit consumes only 1.05 W at 0.5 V supply voltage and reduces it at least by an order of magnitude compared to previous designs. PMID:24841250

  4. A CMOS Humidity Sensor for Passive RFID Sensing Applications

    PubMed Central

    Deng, Fangming; He, Yigang; Zhang, Chaolong; Feng, Wei

    2014-01-01

    This paper presents a low-cost low-power CMOS humidity sensor for passive RFID sensing applications. The humidity sensing element is implemented in standard CMOS technology without any further post-processing, which results in low fabrication costs. The interface of this humidity sensor employs a PLL-based architecture transferring sensor signal processing from the voltage domain to the frequency domain. Therefore this architecture allows the use of a fully digital circuit, which can operate on ultra-low supply voltage and thus achieves low-power consumption. The proposed humidity sensor has been fabricated in the TSMC 0.18 ?m CMOS process. The measurements show this humidity sensor exhibits excellent linearity and stability within the relative humidity range. The sensor interface circuit consumes only 1.05 ?W at 0.5 V supply voltage and reduces it at least by an order of magnitude compared to previous designs. PMID:24841250

  5. Large-area low-temperature ultrananocrystaline diamond (UNCD) films and integration with CMOS devices for monolithically integrated diamond MEMD/NEMS-CMOS systems.

    SciTech Connect

    Sumant, A.V.; Auciello, O.; Yuan, H.-C; Ma, Z.; Carpick, R. W.; Mancini, D. C.; Univ. of Wisconsin; Univ. of Pennsylvania

    2009-05-01

    Because of exceptional mechanical, chemical, and tribological properties, diamond has a great potential to be used as a material for the development of high-performance MEMS and NEMS such as resonators and switches compatible with harsh environments, which involve mechanical motion and intermittent contact. Integration of such MEMS/NEMS devices with complementary metal oxide semiconductor (CMOS) microelectronics will provide a unique platform for CMOS-driven commercial MEMS/NEMS. The main hurdle to achieve diamond-CMOS integration is the relatively high substrate temperatures (600-800 C) required for depositing conventional diamond thin films, which are well above the CMOS operating thermal budget (400 C). Additionally, a materials integration strategy has to be developed to enable diamond-CMOS integration. Ultrananocrystalline diamond (UNCD), a novel material developed in thin film form at Argonne, is currently the only microwave plasma chemical vapor deposition (MPCVD) grown diamond film that can be grown at 400 C, and still retain exceptional mechanical, chemical, and tribological properties comparable to that of single crystal diamond. We have developed a process based on MPCVD to synthesize UNCD films on up to 200 mm in diameter CMOS wafers, which will open new avenues for the fabrication of monolithically integrated CMOS-driven MEMS/NEMS based on UNCD. UNCD films were grown successfully on individual Si-based CMOS chips and on 200 mm CMOS wafers at 400 C in a MPCVD system, using Ar-rich/CH4 gas mixture. The CMOS devices on the wafers were characterized before and after UNCD deposition. All devices were performing to specifications with very small degradation after UNCD deposition and processing. A threshold voltage degradation in the range of 0.08-0.44V and transconductance degradation in the range of 1.5-9% were observed.

  6. Improved Space Object Observation Techniques Using CMOS Detectors

    NASA Astrophysics Data System (ADS)

    Schildknecht, T.; Hinze, A.; Schlatter, P.; Silha, J.; Peltonen, J.; Santti, T.; Flohrer, T.

    2013-08-01

    CMOS-sensors, or in general Active Pixel Sensors (APS), are rapidly replacing CCDs in the consumer camera market. Due to significant technological advances during the past years these devices start to compete with CCDs also for demanding scientific imaging applications, in particular in the astronomy community. CMOS detectors offer a series of inherent advantages compared to CCDs, due to the structure of their basic pixel cells, which each contain their own amplifier and readout electronics. The most prominent advantages for space object observations are the extremely fast and flexible readout capabilities, feasibility for electronic shuttering and precise epoch registration, and the potential to perform image processing operations on-chip and in real-time. Presently applied and proposed optical observation strategies for space debris surveys and space surveillance applications had to be analyzed. The major design drivers were identified and potential benefits from using available and future CMOS sensors were assessed. The major challenges and design drivers for ground-based and space-based optical observation strategies have been analyzed. CMOS detector characteristics were critically evaluated and compared with the established CCD technology, especially with respect to the above mentioned observations. Similarly, the desirable on-chip processing functionalities which would further enhance the object detection and image segmentation were identified. Finally, the characteristics of a particular CMOS sensor available at the Zimmerwald observatory were analyzed by performing laboratory test measurements.

  7. Advantages of a vertical integration process in the design of DNW MAPS

    NASA Astrophysics Data System (ADS)

    Ratti, L.; Gaioni, L.; Manazza, A.; Manghisoni, M.; Re, V.; Traversi, G.

    2015-06-01

    This work discusses the main features of a CMOS Deep N-well (DNW) monolithic active pixel sensor (MAPS) fabricated in a vertically integrated technology, where two 130 nm CMOS homogeneous tiers are processed to obtain a 3D integrated circuit (3D-IC). The 3D CMOS MAPS, which was designed in view of vertexing applications to experiments at high luminosity colliders, features a 20 ?m pitch for a point resolution of about 5 ?m and data sparsification capabilities for high data rate systems. Results from the characterization of different test structures, including single pixels, 33 and 88 matrices, are presented. In particular, measurements have been performed with an infrared laser source to evaluate the charge collection properties of the proposed vertically integrated sensors.

  8. Large area CMOS image sensors

    NASA Astrophysics Data System (ADS)

    Turchetta, R.; Guerrini, N.; Sedgwick, I.

    2011-01-01

    CMOS image sensors, also known as CMOS Active Pixel Sensors (APS) or Monolithic Active Pixel Sensors (MAPS), are today the dominant imaging devices. They are omnipresent in our daily life, as image sensors in cellular phones, web cams, digital cameras, ... In these applications, the pixels can be very small, in the micron range, and the sensors themselves tend to be limited in size. However, many scientific applications, like particle or X-ray detection, require large format, often with large pixels, as well as other specific performance, like low noise, radiation hardness or very fast readout. The sensors are also required to be sensitive to a broad spectrum of radiation: photons from the silicon cut-off in the IR down to UV and X- and gamma-rays through the visible spectrum as well as charged particles. This requirement calls for modifications to the substrate to be introduced to provide optimized sensitivity. This paper will review existing CMOS image sensors, whose size can be as large as a single CMOS wafer, and analyse the technical requirements and specific challenges of large format CMOS image sensors.

  9. CMOS Conductometric System for Growth Monitoring and Sensing of Bacteria.

    PubMed

    Lei Yao; Lamarche, P; Tawil, N; Khan, R; Aliakbar, A M; Hassan, M H; Chodavarapu, V P; Mandeville, R

    2011-06-01

    We present the design and implementation of a prototype complementary metal-oxide semiconductor (CMOS) conductometric integrated circuit (IC) for colony growth monitoring and specific sensing of Escherichia coli (E. coli) bacteria. The detection of E. coli is done by employing T4 bacteriophages as receptor organisms. The conductometric system operates by measuring the resistance of the test sample between the electrodes of a two-electrode electrochemical system (reference electrode and working electrode). The CMOS IC is fabricated in a TSMC 0.35-?m process and uses a current-to-frequency (I to F) conversion circuit to convert the test sample resistance into a digital output modulated in frequency. Pulsewidth control (one-shot circuit) is implemented on-chip to control the pulsewidth of the output digital signal. The novelty in the current work lies in the ability of the CMOS sensor system to monitor very low initial concentrations of bacteria (410(2) to 410(4) colony forming unit (CFU)/mL). The CMOS system is also used to record the interaction between E. coli and its specific receptor T4 bacteriophage. The prototype CMOS IC consumes an average power of 1.85 mW with a 3.3-V dc power supply. PMID:23851473

  10. Nanomechanical switch for integration with CMOS logic.

    SciTech Connect

    Nordquist, Christopher Daniel; Wolfley, Steven L.; Baker, Michael Sean; Czaplewski, David A.; Wendt, Joel Robert; Kraus, Garth Merlin; de Boer, Maarten Pieter; Patrizi, Gary A.

    2008-11-01

    We designed, fabricated and measured the performance of nanoelectromechanical (NEMS) switches. Initial data are reported with one of the switch designs having a measured switching time of 400 ns and an operating voltage of 5 V. The switches operated laterally with unmeasurable leakage current in the 'off' state. Surface micromachining techniques were used to fabricate the switches. All processing was CMOS compatible. A single metal layer, defined by a single mask step, was used as the mechanical switch layer. The details of the modeling, fabrication and testing of the NEMS switches are reported.

  11. Optimum Design of CMOS DC-DC Converter for Mobile Applications

    NASA Astrophysics Data System (ADS)

    Katayama, Yasushi; Edo, Masaharu; Denta, Toshio; Kawashima, Tetsuya; Ninomiya, Tamotsu

    In recent years, low output power CMOS DC-DC converters which integrate power stage MOSFETs and a PWM controller using CMOS process have been used in many mobile applications. In this paper, we propose the calculation method of CMOS DC-DC converter efficiency and report optimum design of CMOS DC-DC converter based on this method. By this method, converter efficiencies are directly calculated from converter specifications, dimensions of power stage MOSFET and device parameters. Therefore, this method can be used for optimization of CMOS DC-DC converter design, such as dimensions of power stage MOSFET and switching frequency. The efficiency calculated by the proposed method agrees well with the experimental results.

  12. CMOS digital intra-oral sensor for x-ray radiography

    NASA Astrophysics Data System (ADS)

    Liu, Xinqiao; Byczko, Andrew; Choi, Marcus; Chung, Lap; Do, Hung; Fowler, Boyd; Ispasoiu, Radu; Joshi, Kumar; Miller, Todd; Nagy, Alex; Reaves, David; Rodricks, Brian; Teeter, Doug; Wang, George; Xiao, Feng

    2011-03-01

    In this paper, we present a CMOS digital intra-oral sensor for x-ray radiography. The sensor system consists of a custom CMOS imager, custom scintillator/fiber optics plate, camera timing and digital control electronics, and direct USB communication. The CMOS imager contains 1700 x 1346 pixels. The pixel size is 19.5um x 19.5um. The imager was fabricated with a 0.18um CMOS imaging process. The sensor and CMOS imager design features chamfered corners for patient comfort. All camera functions were integrated within the sensor housing and a standard USB cable was used to directly connect the intra-oral sensor to the host computer. The sensor demonstrated wide dynamic range from 5uGy to 1300uGy and high image quality with a SNR of greater than 160 at 400uGy dose. The sensor has a spatial resolution more than 20 lp/mm.

  13. Integration of GMR-based spin torque oscillators and CMOS circuitry

    NASA Astrophysics Data System (ADS)

    Chen, Tingsu; Eklund, Anders; Sani, Sohrab; Rodriguez, Saul; Malm, B. Gunnar; kerman, Johan; Rusu, Ana

    2015-09-01

    This paper demonstrates the integration of giant magnetoresistance (GMR) spin torque oscillators (STO) with dedicated high frequency CMOS circuits. The wire-bonding-based integration approach is employed in this work, since it allows easy implementation, measurement and replacement. A GMR STO is wire-bonded to the dedicated CMOS integrated circuit (IC) mounted on a PCB, forming a (GMR STO + CMOS IC) pair. The GMR STO has a lateral size of 70 nm and more than an octave of tunability in the microwave frequency range. The proposed CMOS IC provides the necessary bias-tee for the GMR STO, as well as electrostatic discharge (ESD) protection and wideband amplification targeting high frequency GMR STO-based applications. It is implemented in a 65 nm CMOS process, offers a measured gain of 12 dB, while consuming only 14.3 mW and taking a total silicon area of 0.329 mm2. The measurement results show that the (GMR STO + CMOS IC) pair has a wide tunability range from 8 GHz to 16.5 GHz and improves the output power of the GMR STO by about 10 dB. This GMR STO-CMOS integration eliminates wave reflections during the signal transmission and therefore exhibits good potential for developing high frequency GMR STO-based applications, which combine the features of CMOS and STO technologies.

  14. Fabrication and characterization of CMOS-MEMS thermoelectric micro generators.

    PubMed

    Kao, Pin-Hsu; Shih, Po-Jen; Dai, Ching-Liang; Liu, Mao-Chen

    2010-01-01

    This work presents a thermoelectric micro generator fabricated by the commercial 0.35 ?m complementary metal oxide semiconductor (CMOS) process and the post-CMOS process. The micro generator is composed of 24 thermocouples in series. Each thermocouple is constructed by p-type and n-type polysilicon strips. The output power of the generator depends on the temperature difference between the hot and cold parts in the thermocouples. In order to prevent heat-receiving in the cold part in the thermocouples, the cold part is covered with a silicon dioxide layer with low thermal conductivity to insulate the heat source. The hot part of the thermocouples is suspended and connected to an aluminum plate, to increases the heat-receiving area in the hot part. The generator requires a post-CMOS process to release the suspended structures. The post-CMOS process uses an anisotropic dry etching to remove the oxide sacrificial layer and an isotropic dry etching to etch the silicon substrate. Experimental results show that the micro generator has an output voltage of 67 ?V at the temperature difference of 1 K. PMID:22205869

  15. CMOS Time-Resolved, Contact, and Multispectral Fluorescence Imaging for DNA Molecular Diagnostics

    PubMed Central

    Guo, Nan; Cheung, Ka Wai; Wong, Hiu Tung; Ho, Derek

    2014-01-01

    Instrumental limitations such as bulkiness and high cost prevent the fluorescence technique from becoming ubiquitous for point-of-care deoxyribonucleic acid (DNA) detection and other in-field molecular diagnostics applications. The complimentary metal-oxide-semiconductor (CMOS) technology, as benefited from process scaling, provides several advanced capabilities such as high integration density, high-resolution signal processing, and low power consumption, enabling sensitive, integrated, and low-cost fluorescence analytical platforms. In this paper, CMOS time-resolved, contact, and multispectral imaging are reviewed. Recently reported CMOS fluorescence analysis microsystem prototypes are surveyed to highlight the present state of the art. PMID:25365460

  16. Design and fabrication of a CMOS MEMS logic gate

    NASA Astrophysics Data System (ADS)

    Tsai, Chun-Yin; Chen, Tsung-Lin; Liao, Hsin-Hao; Lin, Chen-Fu; Juang, Ying-Zong

    2011-03-01

    This study aims to develop a novel CMOS-MEMS logic gate via commercially available CMOS process (TSMC, 2P4M). Compared to existing CMOS MEMS designs, which uses foundry processes, the proposed design imposes several new challenges including: carrying two voltage levels on a non-warping suspended plate, metal-to- metal contact, and etc. Different combinations of oxide-metal films and post-CMOS process are investigated to achieve a non-warping suspended structure layer. And different wet etchants are investigated to remove sacrificial layers without attacking structure layers and features. In a prototype design, the selected structure layer is metal-3 and oxide film; the device is released using AD-10 and titanium etchant; the device is 250 ?m long, 100 ?m wide, and 1.5 ?m gap. The experimental results show that the suspended plate slightly curls down 0.485 ?m. This device can be actuated by 10/0 V with a moving distance 50nm. The resonant frequency is measured at 36 kHz. Due to the damage of the tungsten plugs, the logic function can only be verified by its mechanical movements instead of electrical readouts for now.

  17. Fully CMOS analog and digital SiPMs

    NASA Astrophysics Data System (ADS)

    Zou, Yu; Villa, Federica; Bronzi, Danilo; Tisa, Simone; Tosi, Alberto; Zappa, Franco

    2015-03-01

    Silicon Photomultipliers (SiPMs) are emerging single photon detectors used in many applications requiring large active area, photon-number resolving capability and immunity to magnetic fields. We present three families of analog SiPM fabricated in a reliable and cost-effective fully standard planar CMOS technology with a total photosensitive area of 11 mm2. These three families have different active areas with fill-factors (21%, 58.3%, 73.7%) comparable to those of commercial SiPM, which are developed in vertical (current flow) custom technologies. The peak photon detection efficiency in the near-UV tops at 38% (fill-factor included) comparable to commercial custom-process ones and dark count rate density is just a little higher than the best-in-class commercial analog SiPMs. Thanks to the CMOS processing, these new SiPMs can be integrated together with active components and electronics both within the microcell and on-chip, in order to act at the microcell level or to perform global pre-processing. We also report CMOS digital SiPMs in the same standard CMOS technology, based on microcells with digitalized processing, all integrated on-chip. This CMOS digital SiPMs has four 321 cells (128 microcells), each consisting of SPAD, active quenching circuit with adjustable dead time, digital control (to switch off noisy SPADs and readout position of detected photons), and fast trigger output signal. The achieved 20% fill-factor is still very good.

  18. Beyond CMOS: heterogeneous integration of III-V devices, RF MEMS and other dissimilar materials/devices with Si CMOS to create intelligent microsystems.

    PubMed

    Kazior, Thomas E

    2014-03-28

    Advances in silicon technology continue to revolutionize micro-/nano-electronics. However, Si cannot do everything, and devices/components based on other materials systems are required. What is the best way to integrate these dissimilar materials and to enhance the capabilities of Si, thereby continuing the micro-/nano-electronics revolution? In this paper, I review different approaches to heterogeneously integrate dissimilar materials with Si complementary metal oxide semiconductor (CMOS) technology. In particular, I summarize results on the successful integration of III-V electronic devices (InP heterojunction bipolar transistors (HBTs) and GaN high-electron-mobility transistors (HEMTs)) with Si CMOS on a common silicon-based wafer using an integration/fabrication process similar to a SiGe BiCMOS process (BiCMOS integrates bipolar junction and CMOS transistors). Our III-V BiCMOS process has been scaled to 200 mm diameter wafers for integration with scaled CMOS and used to fabricate radio-frequency (RF) and mixed signals circuits with on-chip digital control/calibration. I also show that RF microelectromechanical systems (MEMS) can be integrated onto this platform to create tunable or reconfigurable circuits. Thus, heterogeneous integration of III-V devices, MEMS and other dissimilar materials with Si CMOS enables a new class of high-performance integrated circuits that enhance the capabilities of existing systems, enable new circuit architectures and facilitate the continued proliferation of low-cost micro-/nano-electronics for a wide range of applications. PMID:24567473

  19. Beyond CMOS: heterogeneous integration of III–V devices, RF MEMS and other dissimilar materials/devices with Si CMOS to create intelligent microsystems

    PubMed Central

    Kazior, Thomas E.

    2014-01-01

    Advances in silicon technology continue to revolutionize micro-/nano-electronics. However, Si cannot do everything, and devices/components based on other materials systems are required. What is the best way to integrate these dissimilar materials and to enhance the capabilities of Si, thereby continuing the micro-/nano-electronics revolution? In this paper, I review different approaches to heterogeneously integrate dissimilar materials with Si complementary metal oxide semiconductor (CMOS) technology. In particular, I summarize results on the successful integration of III–V electronic devices (InP heterojunction bipolar transistors (HBTs) and GaN high-electron-mobility transistors (HEMTs)) with Si CMOS on a common silicon-based wafer using an integration/fabrication process similar to a SiGe BiCMOS process (BiCMOS integrates bipolar junction and CMOS transistors). Our III–V BiCMOS process has been scaled to 200 mm diameter wafers for integration with scaled CMOS and used to fabricate radio-frequency (RF) and mixed signals circuits with on-chip digital control/calibration. I also show that RF microelectromechanical systems (MEMS) can be integrated onto this platform to create tunable or reconfigurable circuits. Thus, heterogeneous integration of III–V devices, MEMS and other dissimilar materials with Si CMOS enables a new class of high-performance integrated circuits that enhance the capabilities of existing systems, enable new circuit architectures and facilitate the continued proliferation of low-cost micro-/nano-electronics for a wide range of applications. PMID:24567473

  20. Delta-Doped Back-Illuminated CMOS Imaging Arrays: Progress and Prospects

    NASA Technical Reports Server (NTRS)

    Hoenk, Michael E.; Jones, Todd J.; Dickie, Matthew R.; Greer, Frank; Cunningham, Thomas J.; Blazejewski, Edward; Nikzad, Shouleh

    2009-01-01

    In this paper, we report the latest results on our development of delta-doped, thinned, back-illuminated CMOS imaging arrays. As with charge-coupled devices, thinning and back-illumination are essential to the development of high performance CMOS imaging arrays. Problems with back surface passivation have emerged as critical to the prospects for incorporating CMOS imaging arrays into high performance scientific instruments, just as they did for CCDs over twenty years ago. In the early 1990's, JPL developed delta-doped CCDs, in which low temperature molecular beam epitaxy was used to form an ideal passivation layer on the silicon back surface. Comprising only a few nanometers of highly-doped epitaxial silicon, delta-doping achieves the stability and uniformity that are essential for high performance imaging and spectroscopy. Delta-doped CCDs were shown to have high, stable, and uniform quantum efficiency across the entire spectral range from the extreme ultraviolet through the near infrared. JPL has recently bump-bonded thinned, delta-doped CMOS imaging arrays to a CMOS readout, and demonstrated imaging. Delta-doped CMOS devices exhibit the high quantum efficiency that has become the standard for scientific-grade CCDs. Together with new circuit designs for low-noise readout currently under development, delta-doping expands the potential scientific applications of CMOS imaging arrays, and brings within reach important new capabilities, such as fast, high-sensitivity imaging with parallel readout and real-time signal processing. It remains to demonstrate manufacturability of delta-doped CMOS imaging arrays. To that end, JPL has acquired a new silicon MBE and ancillary equipment for delta-doping wafers up to 200mm in diameter, and is now developing processes for high-throughput, high yield delta-doping of fully-processed wafers with CCD and CMOS imaging devices.

  1. A programmable second order oversampling CMOS sigma-delta analog-to-digital converter for low-power sensor interface electronics

    NASA Astrophysics Data System (ADS)

    Soundararajan, R.; Srivastava, A.; Xu, Y.

    2010-04-01

    A programmable second order oversampling sigma-delta analog-to-digital converter (ADC) is designed and fabricated in 0.5 μm n-well CMOS process for low-power interface electronics of a sensor node in wireless sensor networks. The sigma-delta ADC can be programmed to operate at three different oversampling ratios of 16, 32, and 64 to give three different resolutions of 9, 12 and 14 bits, respectively which impact the power consumption of the sensor module. The major part of power is consumed in the decimator of the ADC by the integrators which operate at the highest sampling rate. Hence, an alternate design is introduced in the integrator stages by inserting sign extension coder circuits and reusing the same integrators for different resolutions and oversampling ratios. The programmable ADC can be interfaced with on or off-chip nanosensors for detection of traces of toxic gases and chemicals.

  2. Realization of a 10M/100Mbps CMOS monolithic optical receiver

    NASA Astrophysics Data System (ADS)

    Yan, Huangping; Li, Jifang; Cheng, Xiang; Lu, Jing; Huang, Yuanqing; Chen, Chao

    2009-11-01

    A monolithic optical receiver fabricated in standard 0.5?m CMOS process is presented. The fingered doublephotodetector with structure of P+/N-well and N-well/P-substrate is designed. Some critical characteristics of doublephotodetector are analyzed in detail. At 2.5V reverse voltage, the maximum dark current is 10 pA. The intrinsic cut-off frequency is above 100MHz. The measured and simulated responsivity is 0.04A/W and 0.03A/W at 850nm wavelength, respectively. In the testing of double-photodetector, the minimum and maximum of rise time is 2.67ns and 7.11ns while the minimum and maximum of fall time is 2.67ns and 31.78ns. A Spice model of DPD is established for the compatibledesign of OEIC. In simulation of pre-amplifier circuit, the pass-band gain is approximate 18.8 K?. The lower cut-off frequency is 7KHz while the upper cut-off frequency is 700MHz. The simulated eye diagram of OEIC at 100Mbps is featured of clear trace, wide eye-opening and small zero-crossing distortion. The small signal bandwidth of OEIC is about 54MHz. The eye diagram at 50Mbps and 250Mbps has some distortion due to direct current malajustment. In the point-to-point optical interconnection, the transmission bit rate of 72Mbps is achieved. The monolithic optical receiver can be applied in 10M/100Mbps optical data transmission.

  3. Digital-Centric RF CMOS Technologies

    NASA Astrophysics Data System (ADS)

    Matsuzawa, Akira

    Analog-centric RFCMOS technology has played an important role in motivating the change of technology from conventional discrete device technology or bipolar IC technology to CMOS technology. However it introduces many problems such as poor performance, susceptibility to PVT fluctuation, and cost increase with technology scaling. The most important advantage of CMOS technology compared with legacy RF technology is that CMOS can use more high performance digital circuits for very low cost. In fact, analog-centric RF-CMOS technology has failed the FM/AM tuner business and the digital-centric CMOS technology is becoming attractive for many users. It has many advantages; such as high performance, no external calibration points, high yield, and low cost. From the above facts, digital-centric CMOS technology which utilizes the advantages of digital technology must be the right path for future RF technology. Further investment in this technology is necessary for the advancement of RF technology.

  4. Development of CMOS-compatible membrane projection lithography

    NASA Astrophysics Data System (ADS)

    Burckel, D. Bruce; Samora, Sally; Wiwi, Mike; Wendt, Joel R.

    2013-09-01

    Recently we have demonstrated membrane projection lithography (MPL) as a fabrication approach capable of creating 3D structures with sub-micron metallic inclusions for use in metamaterial and plasmonic applications using polymer material systems. While polymers provide several advantages in processing, they are soft and subject to stress-induced buckling. Furthermore, in next generation active photonic structures, integration of photonic components with CMOS electronics is desirable. While the MPL process flow is conceptually simple, it requires matrix, membrane and backfill materials with orthogonal processing deposition/removal chemistries. By transitioning the MPL process flow into an entirely inorganic material set based around silicon and standard CMOS-compatible materials, several elements of silicon microelectronics can be integrated into photonic devices at the unit-cell scale. This paper will present detailed fabrication and characterization data of these materials, emphasizing the processing trade space as well as optical characterization of the resulting structures.

  5. CMOS image sensor with contour enhancement

    NASA Astrophysics Data System (ADS)

    Meng, Liya; Lai, Xiaofeng; Chen, Kun; Yuan, Xianghui

    2010-10-01

    Imitating the signal acquisition and processing of vertebrate retina, a CMOS image sensor with bionic pre-processing circuit is designed. Integration of signal-process circuit on-chip can reduce the requirement of bandwidth and precision of the subsequent interface circuit, and simplify the design of the computer-vision system. This signal pre-processing circuit consists of adaptive photoreceptor, spatial filtering resistive network and Op-Amp calculation circuit. The adaptive photoreceptor unit with a dynamic range of approximately 100 dB has a good self-adaptability for the transient changes in light intensity instead of intensity level itself. Spatial low-pass filtering resistive network used to mimic the function of horizontal cell, is composed of the horizontal resistor (HRES) circuit and OTA (Operational Transconductance Amplifier) circuit. HRES circuit, imitating dendrite of the neuron cell, comprises of two series MOS transistors operated in weak inversion region. Appending two diode-connected n-channel transistors to a simple transconductance amplifier forms the OTA Op-Amp circuit, which provides stable bias voltage for the gate of MOS transistors in HRES circuit, while serves as an OTA voltage follower to provide input voltage for the network nodes. The Op-Amp calculation circuit with a simple two-stage Op-Amp achieves the image contour enhancing. By adjusting the bias voltage of the resistive network, the smoothing effect can be tuned to change the effect of image's contour enhancement. Simulations of cell circuit and 1616 2D circuit array are implemented using CSMC 0.5?m DPTM CMOS process.

  6. Steps toward fabricating cryogenic CMOS compatible single electron devices for future qubits.

    SciTech Connect

    Wendt, Joel Robert; Childs, Kenton David; Ten Eyck, Gregory A.; Tracy, Lisa A.; Eng, Kevin; Stevens, Jeffrey; Nordberg, Eric; Carroll, Malcolm S.; Lilly, Michael Patrick

    2008-08-01

    We describe the development of a novel silicon quantum bit (qubit) device architecture that involves using materials that are compatible with a Sandia National Laboratories (SNL) 0.35 mum complementary metal oxide semiconductor (CMOS) process intended to operate at 100 mK. We describe how the qubit structure can be integrated with CMOS electronics, which is believed to have advantages for critical functions like fast single electron electrometry for readout compared to current approaches using radio frequency techniques. Critical materials properties are reviewed and preliminary characterization of the SNL CMOS devices at 4.2 K is presented.

  7. A 340-nm-band ultraviolet laser diode composed of GaN well layers.

    PubMed

    Yamashita, Yoji; Kuwabara, Masakazu; Torii, Kousuke; Yoshida, Harumasa

    2013-02-11

    We have demonstrated the laser operation of a short-wavelength ultraviolet laser diode with multiple-quantum-wells composed of GaN well layers. The laser action has been achieved in 340-nm-band far from the wavelength corresponding to GaN band gap under the pulsed current mode at room temperature. The device has been realized on the Al(0.2)Ga(0.8)N underlying layer. The AlN mole fraction of the underlying layer is 0.1 lower than that of the underlying layer which was used for the previously reported 342 nm laser diode. These results provide a chance to the next step for a shorter-wavelength ultraviolet laser diode. PMID:23481771

  8. Novel CMOS readout techniques for uncooled pyroelectric IR FPA

    NASA Astrophysics Data System (ADS)

    Sun, Tai-Ping; Chin, Yuan-Lung; Chung, Wen-Yaw; Hsiung, Shen-Kan; Chou, Jung-Chuan

    1998-09-01

    Based on the application of the source follower per detector (SFD) input biasing technique, a new redout structure for the IR focal-plane-array (FPA), called the variable gain source follower per detector (VGSFD) is proposed and analyzed. The readout circuit of VGSFD of a unit cell of pyroelectric sensor under investigation, is composed of a source follower per detector circuit, high gain amplifier, and the reset switch. The VGSFD readout chip has been designed in 0.5 micrometers double-poly-double-metal n-well CMOS technology in various formats from 8 by 8 to 128 by 128. The experimental 8 by 8 VGSFD measurement results of the fabricated readout chip at room temperature have successfully verified both the readout function and performance. The high gain, low power, high sensitivity readout performances are achieved in a 50 by 50 micrometers (superscript 2) pixel size.

  9. Optical and noise performance of CMOS solid-state photomultipliers

    NASA Astrophysics Data System (ADS)

    Chen, Xiao Jie; Johnson, Erik B.; Staples, Christopher J.; Chapman, Eric; Alberghini, Guy; Christian, James F.

    2010-08-01

    Solid-state photomultipliers (SSPM) are photodetectors composed of avalanche photodiode pixel arrays operating in Geiger mode (biased above diode breakdown voltage). They are built using CMOS technology and can be used in a variety of applications in high energy and nuclear physics, medical imaging and homeland security related areas. The high gain and low cost associated with the SSPM makes it an attractive alternative to existing photodetectors such as the photomultiplier tube (PMT). The capability of integrating CMOS on-chip readout circuitry on the same substrate as the SSPM also provides a compact and low-power-consumption solution to photodetector applications with stringent area and power requirements. The optical performance of the SSPM, specifically the detection and quantum efficiencies, can depend on the geometry and the doping profile associated with each photodiode pixel. The noise associated with the SSPM not only includes dark noise from each pixel, but also consists of excess noise terms due to after pulsing and inter-pixel cross talk. The magnitude of the excess noise terms can depend on biasing conditions, temperature, as well as pixel and inter-pixel dimensions. We present the optical and noise performance of SSPMs fabricated in a conventional CMOS process, and demonstrate the dependence of the SSPM performance on pixel/inter-pixel geometry, doping profile, temperature, as well as bias conditions. The continuing development of CMOS SSPM technology demonstrated here shows that low cost and high performance solid state photodetectors are viable solutions for many existing and future optical detection applications.

  10. Research-grade CMOS image sensors for demanding space applications

    NASA Astrophysics Data System (ADS)

    Saint-P, Olivier; Tulet, Michel; Davancens, Robert; Larnaudie, Franck; Magnan, Pierre; Corbire, Franck; Martin-Gonthier, Philippe; Belliot, Pierre

    2004-06-01

    Imaging detectors are key elements for optical instruments and sensors on board space missions dedicated to Earth observation (high resolution imaging, atmosphere spectroscopy...), Solar System exploration (micro cameras, guidance for autonomous vehicle...) and Universe observation (space telescope focal planes, guiding sensors...). This market has been dominated by CCD technology for long. Since the mid-90s, CMOS Image Sensors (CIS) have been competing with CCDs for more and more consumer domains (webcams, cell phones, digital cameras...). Featuring significant advantages over CCD sensors for space applications (lower power consumption, smaller system size, better radiations behaviour...), CMOS technology is also expanding in this field, justifying specific R&D and development programs funded by national and European space agencies (mainly CNES, DGA, and ESA). All along the 90s and thanks to their increasingly improving performances, CIS have started to be successfully used for more and more demanding applications, from vision and control functions requiring low-level performances to guidance applications requiring medium-level performances. Recent technology improvements have made possible the manufacturing of research-grade CIS that are able to compete with CCDs in the high-performances arena. After an introduction outlining the growing interest of optical instruments designers for CMOS image sensors, this talk will present the existing and foreseen ways to reach high-level electro-optics performances for CIS. The developments of CIS prototypes built using an imaging CMOS process and of devices based on improved designs will be presented.

  11. Research-grade CMOS image sensors for remote sensing applications

    NASA Astrophysics Data System (ADS)

    Saint-Pe, Olivier; Tulet, Michel; Davancens, Robert; Larnaudie, Franck; Magnan, Pierre; Martin-Gonthier, Philippe; Corbiere, Franck; Belliot, Pierre; Estribeau, Magali

    2004-11-01

    Imaging detectors are key elements for optical instruments and sensors on board space missions dedicated to Earth observation (high resolution imaging, atmosphere spectroscopy...), Solar System exploration (micro cameras, guidance for autonomous vehicle...) and Universe observation (space telescope focal planes, guiding sensors...). This market has been dominated by CCD technology for long. Since the mid-90s, CMOS Image Sensors (CIS) have been competing with CCDs for consumer domains (webcams, cell phones, digital cameras...). Featuring significant advantages over CCD sensors for space applications (lower power consumption, smaller system size, better radiations behaviour...), CMOS technology is also expanding in this field, justifying specific R&D and development programs funded by national and European space agencies (mainly CNES, DGA and ESA). All along the 90s and thanks to their increasingly improving performances, CIS have started to be successfully used for more and more demanding space applications, from vision and control functions requiring low-level performances to guidance applications requiring medium-level performances. Recent technology improvements have made possible the manufacturing of research-grade CIS that are able to compete with CCDs in the high-performances arena. After an introduction outlining the growing interest of optical instruments designers for CMOS image sensors, this paper will present the existing and foreseen ways to reach high-level electro-optics performances for CIS. The developments and performances of CIS prototypes built using an imaging CMOS process will be presented in the corresponding section.

  12. DNA decorated carbon nanotube sensors on CMOS circuitry for environmental monitoring

    NASA Astrophysics Data System (ADS)

    Liu, Yu; Chen, Chia-Ling; Agarwal, V.; Li, Xinghui; Sonkusale, S.; Dokmeci, Mehmet R.; Wang, Ming L.

    2010-04-01

    Single-walled carbon nanotubes (SWNTs) with their large surface area, high aspect ratio are one of the novel materials which have numerous attractive features amenable for high sensitivity sensors. Several nanotube based sensors including, gas, chemical and biosensors have been demonstrated. Moreover, most of these sensors require off chip components to detect the variations in the signals making them complicated and hard to commercialize. Here we present a novel complementary metal oxide semiconductor (CMOS) integrated carbon nanotube sensors for portable high sensitivity chemical sensing applications. Multiple zincation steps have been developed to ascertain proper electrical connectivity between the carbon nanotubes and the foundry made CMOS circuitry. The SWNTs have been integrated onto (CMOS) circuitry as the feedback resistor of a Miller compensated operational amplifier utilizing low temperature Dielectrophoretic (DEP) assembly process which has been tailored to be compatible with the post-CMOS integration at the die level. Building nanotube sensors directly on commercial CMOS circuitry allows single chip solutions eliminating the need for long parasitic lines and numerous wire bonds. The carbon nanotube sensors realized on CMOS circuitry show strong response to various vapors including Dimethyl methylphosphonate and Dinitrotoluene. The remarkable set of attributes of the SWNTs realized on CMOS electronic chips provides an attractive platform for high sensitivity portable nanotube based bio and chemical sensors.

  13. A 13.56 MHz CMOS Active Rectifier With Switched-Offset and Compensated Biasing for Biomedical Wireless Power Transfer Systems.

    PubMed

    Lu, Yan; Ki, Wing-Hung

    2013-07-01

    A full-wave active rectifier switching at 13.56 MHz with compensated bias current for a wide input range for wirelessly powered high-current biomedical implants is presented. The four diodes of a conventional passive rectifier are replaced by two cross-coupled PMOS transistors and two comparator- controlled NMOS switches to eliminate diode voltage drops such that high voltage conversion ratio and power conversion efficiency could be achieved even at low AC input amplitude |VAC|. The comparators are implemented with switched-offset biasing to compensate for the delays of active diodes and to eliminate multiple pulsing and reverse current. The proposed rectifier uses a modified CMOS peaking current source with bias current that is quasi-inversely proportional to the supply voltage to better control the reverse current over a wide AC input range (1.5 to 4 V). The rectifier was fabricated in a standard 0.35 ?m CMOS N-well process with active area of 0.0651 mm(2). For the proposed rectifier measured at |VAC| = 3.0 V, the voltage conversion ratios are 0.89 and 0.93 for RL=500 ? and 5 k?, respectively, and the measured power conversion efficiencies are 82.2% to 90.1% with |VAC| ranges from 1.5 to 4 V for RL=500 ?. PMID:23846494

  14. Development of submicron CMOS in 6H-SiC

    NASA Astrophysics Data System (ADS)

    Lam, Man Pio

    1998-11-01

    CMOS in 6H-silicon carbide (SiC) has been developed recently. Its major application is to be used as monolithic control circuits for SiC MOS-based power devices. From a system perspective, SiC CMOS is not well suited for high-end microprocessor design. However, in high-voltage power switching applications, CMOS circuits are required to provide rapid response time for the safety operation of a system. Despite previous developments in CMOS process technology which has enabled digital circuit operation using a 5 V power supply voltage, switching speeds are considerably slow. The main force to drive circuit speed is the shrinking of the minimum dimension of the transistor. As the feature sizes of MOS technologies are scaled to smaller dimensions, considerable challenges arise in the area of fabrication and device design. This work describes the recent progress in the development of 6H-SiC submicron CMOS. Conventional NMOS transistors fabricated with 0.5 micron (drawn) channel length have demonstrated acceptable short channel effects. PMOS transistors have experienced punchthrough with channel lengths below 0.8 Micron. Inverter and ring oscillators have been implemented with 0.8 Micron channel lengths. They can operate on a 2 V supply voltage and show a gate delay of 31 ns at VDD = 10 V. Considerable channel engineering has been performed on small PMOS transistors to obtain low leakage current. As the channel is scaled down further, the current drivability may not benefit accordingly. The influence of parasitic series resistance on the performance of scaled devices is examined.

  15. Analysis of CMOS-compatible lateral insulated base transistors

    NASA Astrophysics Data System (ADS)

    Narayanan, E. M. S.; Amaratunga, G. A. J.; Milne, W. I.; Huang, Q.; Humphrey, J. I.

    1991-07-01

    Performance results are reported for various lateral insulated-base transistors (LIBTs) fabricated with a 2.5-micron digital CMOS-compatible high-voltage integrated circuit (HVIC) process. Structural modifications have been proposed to the LIBTs reported to date, in order to improve their on-stage performance. The modifications have been achieved with the use of charge-controlled n(+) buried layers incorporated within the device structures. The fabrication process utilizes three additional steps carried out prior to the CMOS fabrication sequence. An important feature of this HVIC process is the use of a 40-nm gate oxide, which makes the power devices fully compatible with the low-voltage digital circuits. During this work, a specific on-resistance of 0.016 ohm sq cm and a turn-off delay of 90 nsec have been obtained in an improved LIBT structure which is capable of withstanding up to 250 V.

  16. CMOS-based smart-electrode-type retinal stimulator with bullet-shaped bulk Pt electrodes.

    PubMed

    Tokuda, T; Ito, T; Kitao, T; Noda, T; Sasagawa, K; Terasawa, Y; Tashiro, H; Kanda, H; Fujikado, T; Ohta, J

    2011-01-01

    A CMOS-based flexible retinal stimulator equipped with bullet-shaped bulk Pt electrodes was fabricated and demonstrated. We designed a new CMOS unit chip with an on-chip stimulator, single- and multi-site stimulation modes, and monitoring functions. We have developed a new structure and packaging process of flexible retinal stimulator with bullet-type bulk Pt electrode. We have confirmed the retinal stimulation functionality in an in vivo stimulation trial on rabbit's retina. PMID:22255884

  17. CMOS foveal image sensor chip

    NASA Technical Reports Server (NTRS)

    Bandera, Cesar (Inventor); Scott, Peter (Inventor); Sridhar, Ramalingam (Inventor); Xia, Shu (Inventor)

    2002-01-01

    A foveal image sensor integrated circuit comprising a plurality of CMOS active pixel sensors arranged both within and about a central fovea region of the chip. The pixels in the central fovea region have a smaller size than the pixels arranged in peripheral rings about the central region. A new photocharge normalization scheme and associated circuitry normalizes the output signals from the different size pixels in the array. The pixels are assembled into a multi-resolution rectilinear foveal image sensor chip using a novel access scheme to reduce the number of analog RAM cells needed. Localized spatial resolution declines monotonically with offset from the imager's optical axis, analogous to biological foveal vision.

  18. Nanosecond monolithic CMOS readout cell

    DOEpatents

    Souchkov, Vitali V.

    2004-08-24

    A pulse shaper is implemented in monolithic CMOS with a delay unit formed of a unity gain buffer. The shaper is formed of a difference amplifier having one input connected directly to an input signal and a second input connected to a delayed input signal through the buffer. An elementary cell is based on the pulse shaper and a timing circuit which gates the output of an integrator connected to the pulse shaper output. A detector readout system is formed of a plurality of elementary cells, each connected to a pixel of a pixel array, or to a microstrip of a plurality of microstrips, or to a detector segment.

  19. A CMOS microdisplay with integrated controller utilizing improved silicon hot carrier luminescent light sources

    NASA Astrophysics Data System (ADS)

    Venter, Petrus J.; Alberts, Antonie C.; du Plessis, Monuko; Joubert, Trudi-Heleen; Goosen, Marius E.; Janse van Rensburg, Christo; Rademeyer, Pieter; Fauré, Nicolaas M.

    2013-03-01

    Microdisplay technology, the miniaturization and integration of small displays for various applications, is predominantly based on OLED and LCoS technologies. Silicon light emission from hot carrier electroluminescence has been shown to emit light visibly perceptible without the aid of any additional intensification, although the electrical to optical conversion efficiency is not as high as the technologies mentioned above. For some applications, this drawback may be traded off against the major cost advantage and superior integration opportunities offered by CMOS microdisplays using integrated silicon light sources. This work introduces an improved version of our previously published microdisplay by making use of new efficiency enhanced CMOS light emitting structures and an increased display resolution. Silicon hot carrier luminescence is often created when reverse biased pn-junctions enter the breakdown regime where impact ionization results in carrier transport across the junction. Avalanche breakdown is typically unwanted in modern CMOS processes. Design rules and process design are generally tailored to prevent breakdown, while the voltages associated with breakdown are too high to directly interact with the rest of the CMOS standard library. This work shows that it is possible to lower the operating voltage of CMOS light sources without compromising the optical output power. This results in more efficient light sources with improved interaction with other standard library components. This work proves that it is possible to create a reasonably high resolution microdisplay while integrating the active matrix controller and drivers on the same integrated circuit die without additional modifications, in a standard CMOS process.

  20. Hybrid CMOS/Molecular Integrated Circuits

    NASA Astrophysics Data System (ADS)

    Stan, M. R.; Rose, G. S.; Ziegler, M. M.

    CMOS silicon technologies are likely to run out of steam in the next 10-15 years despite revolutionary advances in the past few decades. Molecular and other nanoscale technologies show significant promise but it is unlikely that they will completely replace CMOS, at least in the near term. This chapter explores opportunities for using CMOS and nanotechnology to enhance and complement each other in hybrid circuits. As an example of such a hybrid CMOS/nano system, a nanoscale programmable logic array (PLA) based on majority logic is described along with its supplemental CMOS circuitry. It is believed that such systems will be able to sustain the historical advances in the semiconductor industry while addressing manufacturability, yield, power, cost, and performance challenges.

  1. CMOS-based biosensor systems using integrated nanostructured recognition elements

    NASA Astrophysics Data System (ADS)

    Chodavarapu, Vamsy P.; Shubin, Daniil O.; Bukowski, Rachel M.; Tehan, Elizabeth C.; Titus, Albert H.; Cartwright, Alexander N.; Bright, Frank V.

    2006-02-01

    Rapid advances in point-of-care devices for medical and biomedical diagnostic and therapeutic applications have increased the need for low cost, low power, high throughput, and miniaturized systems. To this end, we developed several optical sensor systems using CMOS detection and processing components and sol-gel derived xerogel recognition elements for monitoring various biochemical analytes. These sensors are based either on the measurement of the luminescence intensity or the excited-state lifetimes of luminophores embedded in the nanostructured xerogel matrices. Specifically, the design and development of CMOS detection and signal processing components and their system integration will be described in detail. Additionally, we will describe the factors that limit the performance of these sensor systems in terms of sensitivity, response time, and dynamic range. Finally, the results obtained for monitoring important biochemical analytes such as oxygen (O II) and glucose will be discussed.

  2. A back-illuminated megapixel CMOS image sensor

    NASA Technical Reports Server (NTRS)

    Pain, Bedabrata; Cunningham, Thomas; Nikzad, Shouleh; Hoenk, Michael; Jones, Todd; Wrigley, Chris; Hancock, Bruce

    2005-01-01

    In this paper, we present the test and characterization results for a back-illuminated megapixel CMOS imager. The imager pixel consists of a standard junction photodiode coupled to a three transistor-per-pixel switched source-follower readout [1]. The imager also consists of integrated timing and control and bias generation circuits, and provides analog output. The analog column-scan circuits were implemented in such a way that the imager could be configured to run in off-chip correlated double-sampling (CDS) mode. The imager was originally designed for normal front-illuminated operation, and was fabricated in a commercially available 0.5 pn triple-metal CMOS-imager compatible process. For backside illumination, the imager was thinned by etching away the substrate was etched away in a post-fabrication processing step.

  3. Smart CMOS image sensor for lightning detection and imaging.

    PubMed

    Rolando, Sbastien; Goiffon, Vincent; Magnan, Pierre; Corbire, Franck; Molina, Romain; Tulet, Michel; Brart-de-Boisanger, Michel; Saint-P, Olivier; Guiry, Saprasad; Larnaudie, Franck; Leone, Bruno; Perez-Cuevas, Leticia; Zayer, Igor

    2013-03-01

    We present a CMOS image sensor dedicated to lightning detection and imaging. The detector has been designed to evaluate the potentiality of an on-chip lightning detection solution based on a smart sensor. This evaluation is performed in the frame of the predevelopment phase of the lightning detector that will be implemented in the Meteosat Third Generation Imager satellite for the European Space Agency. The lightning detection process is performed by a smart detector combining an in-pixel frame-to-frame difference comparison with an adjustable threshold and on-chip digital processing allowing an efficient localization of a faint lightning pulse on the entire large format array at a frequency of 1 kHz. A CMOS prototype sensor with a 256256 pixel array and a 60 ?m pixel pitch has been fabricated using a 0.35 ?m 2P 5M technology and tested to validate the selected detection approach. PMID:23458812

  4. CMOS Imaging Device for Optical Imaging of Biological Activities

    NASA Astrophysics Data System (ADS)

    Shishido, Sanshiro; Oguro, Yasuhiro; Noda, Toshihiko; Sasagawa, Kiyotaka; Tokuda, Takashi; Ohta, Jun

    In this paper, we propose a CMOS image sensor device placed on the brain surface or cerebral sulcus (Fig. 1). The device has a photo detector array where a single optical detector is usually used. The proposed imaging device enables the analysis which reflects a surface blood pattern in the observed area. It is also possible to improve effective sensitivity by image processing and to simplify the measurement system by the CMOS sensor device with on-chip light source. We describe the design details and characterization of proposed device. We also demonstrate detection of hemoglobin oxygenation level with external light source, imaging capability of biological activities, and image processing for sensitivity improvement is also realized.

  5. Hardening of commercial CMOS PROMs with polysilicon fusible links

    NASA Technical Reports Server (NTRS)

    Newman, W. H.; Rauchfuss, J. E.

    1985-01-01

    The method by which a commercial 4K CMOS PROM with polysilicon fuses was hardened and the feasibility of applying this method to a 16K PROM are presented. A description of the process and the necessary minor modifications to the original layout are given. The PROM circuit and discrete device characteristics over radiation to 1000K rad-Si are summarized. The dose rate sensitivity of the 4K PROMs is also presented.

  6. A low-cost CMOS-MEMS piezoresistive accelerometer with large proof mass.

    PubMed

    Khir, Mohd Haris Md; Qu, Peng; Qu, Hongwei

    2011-01-01

    This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive sensing material. A full Wheatstone bridge was constructed through easy wiring allowed by the three metal layers in the 0.5 μm CMOS technology. The device fabrication process consisted of a standard CMOS process for sensor configuration, and a deep reactive ion etching (DRIE) based post-CMOS microfabrication for MEMS structure release. A bulk single-crystal silicon (SCS) substrate is included in the proof mass to increase sensor sensitivity. In device design and analysis, the self heating of the polysilicon piezoresistors and its effect to the sensor performance is also discussed. With a low operating power of 1.5 mW, the accelerometer demonstrates a sensitivity of 0.077 mV/g prior to any amplification. Dynamic tests have been conducted with a high-end commercial calibrating accelerometer as reference. PMID:22164052

  7. A single-supply, monolithic, MIL-STD-1553 transceiver implemented in BiCMOS wafer fabrication technology

    NASA Astrophysics Data System (ADS)

    Albrecht, Thomas L.; Molinari, Lou

    An integrated circuit has been designed for use as a single supply, MIL-STD-1553 transceiver using BiCMOS technology. Use of the BiCMOS fabrication process has advantages over both Bipolar and CMOS technologies. These advantages include: reduced standby current drain, increased flexibility in mating the transceiver to various remote terminals, increased control over output amplitude and rise/fall times, easier methods for adjusting filter response and residual voltage, and reduced chip size (over a CMOS transceiver). Development of this monolithic transceiver opens the door to future advances in remote terminal design. By combining the current driving capacity of Bipolar with the digital design capability of CMOS, the next probable step in the progression of MIL-STD-1553 technology would be a fully monolithic remote terminal. This device would combine a transceiver with the encoder/decoder and protocol logic on a single semiconductor device.

  8. Improved Space Object Orbit Determination Using CMOS Detectors

    NASA Astrophysics Data System (ADS)

    Schildknecht, T.; Peltonen, J.; Sännti, T.; Silha, J.; Flohrer, T.

    2014-09-01

    CMOS-sensors, or in general Active Pixel Sensors (APS), are rapidly replacing CCDs in the consumer camera market. Due to significant technological advances during the past years these devices start to compete with CCDs also for demanding scientific imaging applications, in particular in the astronomy community. CMOS detectors offer a series of inherent advantages compared to CCDs, due to the structure of their basic pixel cells, which each contains their own amplifier and readout electronics. The most prominent advantages for space object observations are the extremely fast and flexible readout capabilities, feasibility for electronic shuttering and precise epoch registration, and the potential to perform image processing operations on-chip and in real-time. The major challenges and design drivers for ground-based and space-based optical observation strategies have been analyzed. CMOS detector characteristics were critically evaluated and compared with the established CCD technology, especially with respect to the above mentioned observations. Similarly, the desirable on-chip processing functionalities which would further enhance the object detection and image segmentation were identified. Finally, we simulated several observation scenarios for ground- and space-based sensor by assuming different observation and sensor properties. We will introduce the analyzed end-to-end simulations of the ground- and space-based strategies in order to investigate the orbit determination accuracy and its sensitivity which may result from different values for the frame-rate, pixel scale, astrometric and epoch registration accuracies. Two cases were simulated, a survey using a ground-based sensor to observe objects in LEO for surveillance applications, and a statistical survey with a space-based sensor orbiting in LEO observing small-size debris in LEO. The ground-based LEO survey uses a dynamical fence close to the Earth shadow a few hours after sunset. For the space-based scenario a sensor in a sun-synchronous LEO orbit, always pointing in the anti-sun direction to achieve optimum illumination conditions for small LEO debris, was simulated. For the space-based scenario the simulations showed a 20 130 % improvement of the accuracy of all orbital parameters when varying the frame rate from 1/3 fps, which is the fastest rate for a typical CCD detector, to 50 fps, which represents the highest rate of scientific CMOS cameras. Changing the epoch registration accuracy from a typical 20.0 ms for a mechanical shutter to 0.025 ms, the theoretical value for the electronic shutter of a CMOS camera, improved the orbit accuracy by 4 to 190 %. The ground-based scenario also benefit from the specific CMOS characteristics, but to a lesser extent.

  9. Forced Chaos Generator with CMOS Variable Active Inductor Circuit

    NASA Astrophysics Data System (ADS)

    Tsubaki, Yusuke; Sekikawa, Munehisa; Horio, Yosihiko

    We propose a forced chaos generator with a CMOS variable active inductor circuit. The equivalent inductance of the variable active inductor in the proposed circuit can be controlled by an external voltage. Therefore, the oscillation frequencies of the circuit can be altered by applying an external periodic square waveform. As a result, we can generate chaos from the circuit. We then confirm the folding-and-stretching mechanism of the chaotic motion in the circuit. Complex phenomena, observed in the proposed circuit, are analyzed through the Poincar sections from the SPICE simulations with TSMC 0.35?m CMOS semiconductor process parameters. In addition, we define a return map on the Poincar section to examine the properties of the observed attractors. Moreover, we investigate the bifurcation phenomena when the amplitude and period of the external signal are changed as bifurcation parameters.

  10. Monolithic CMOS-MEMS integration for high-g accelerometers

    NASA Astrophysics Data System (ADS)

    Narasimhan, Vinayak; Li, Holden; Tan, Chuan Seng

    2014-10-01

    This paper highlights work-in-progress towards the conceptualization, simulation, fabrication and initial testing of a silicon-germanium (SiGe) integrated CMOS-MEMS high-g accelerometer for military, munition, fuze and shock measurement applications. Developed on IMEC's SiGe MEMS platform, the MEMS offers a dynamic range of 5,000 g and a bandwidth of 12 kHz. The low noise readout circuit adopts a chopper-stabilization technique implementing the CMOS through the TSMC 0.18 m process. The device structure employs a fully differential split comb-drive set up with two sets of stators and a rotor all driven separately. Dummy structures acting as protective over-range stops were designed to protect the active components when under impacts well above the designed dynamic range.

  11. High-Voltage-Input Level Translator Using Standard CMOS

    NASA Technical Reports Server (NTRS)

    Yager, Jeremy A.; Mojarradi, Mohammad M.; Vo, Tuan A.; Blalock, Benjamin J.

    2011-01-01

    proposed integrated circuit would translate (1) a pair of input signals having a low differential potential and a possibly high common-mode potential into (2) a pair of output signals having the same low differential potential and a low common-mode potential. As used here, "low" and "high" refer to potentials that are, respectively, below or above the nominal supply potential (3.3 V) at which standard complementary metal oxide/semiconductor (CMOS) integrated circuits are designed to operate. The input common-mode potential could lie between 0 and 10 V; the output common-mode potential would be 2 V. This translation would make it possible to process the pair of signals by use of standard 3.3-V CMOS analog and/or mixed-signal (analog and digital) circuitry on the same integrated-circuit chip. A schematic of the circuit is shown in the figure. Standard 3.3-V CMOS circuitry cannot withstand input potentials greater than about 4 V. However, there are many applications that involve low-differential-potential, high-common-mode-potential input signal pairs and in which standard 3.3-V CMOS circuitry, which is relatively inexpensive, would be the most appropriate circuitry for performing other functions on the integrated-circuit chip that handles the high-potential input signals. Thus, there is a need to combine high-voltage input circuitry with standard low-voltage CMOS circuitry on the same integrated-circuit chip. The proposed circuit would satisfy this need. In the proposed circuit, the input signals would be coupled into both a level-shifting pair and a common-mode-sensing pair of CMOS transistors. The output of the level-shifting pair would be fed as input to a differential pair of transistors. The resulting differential current output would pass through six standoff transistors to be mirrored into an output branch by four heterojunction bipolar transistors. The mirrored differential current would be converted back to potential by a pair of diode-connected transistors, which, by virtue of being identical to the input transistors, would reproduce the input differential potential at the output

  12. CMOS-sensors for energy-resolved X-ray imaging

    NASA Astrophysics Data System (ADS)

    Doering, D.; Amar-Youcef, S.; Baudot, J.; Deveaux, M.; Dulinski, W.; Kachel, M.; Linnik, B.; Müntz, C.; Stroth, Joachim

    2016-01-01

    Due to their low noise, CMOS Monolithic Active Pixel Sensors are suited to sense X-rays with a few keV quantum energy, which is of interest for high resolution X-ray imaging. Moreover, the good energy resolution of the silicon sensors might be used to measure this quantum energy. Combining both features with the good spatial resolution of CMOS sensors opens the potential to build ``color sensitive" X-ray cameras. Taking such colored images is hampered by the need to operate the CMOS sensors in a single photon counting mode, which restricts the photon flux capability of the sensors. More importantly, the charge sharing between the pixels smears the potentially good energy resolution of the sensors. Based on our experience with CMOS sensors for charged particle tracking, we studied techniques to overcome the latter by means of an offline processing of the data obtained from a CMOS sensor prototype. We found that the energy resolution of the pixels can be recovered at the expense of reduced quantum efficiency. We will introduce the results of our study and discuss the feasibility of taking colored X-ray pictures with CMOS sensors.

  13. Low-frequency noise reduction in vertical MOSFETs having tunable threshold voltage fabricated with 60 nm CMOS technology on 300 mm wafer process

    NASA Astrophysics Data System (ADS)

    Imamoto, Takuya; Ma, Yitao; Muraguchi, Masakazu; Endoh, Tetsuo

    2015-04-01

    In this paper, DC and low-frequency noise (LFN) characteristics have been investigated with actual measurement data in both n- and p-type vertical MOSFETs (V-MOSFETs) for the first time. The V-MOSFETs which was fabricated on 300 mm bulk silicon wafer process have realized excellent DC performance and a significant reduction of flicker (1/f) noise. The measurement results show that the fabricated V-MOSFETs with 60 nm silicon pillar and 100 nm gate length achieve excellent steep sub-threshold swing (69 mV/decade for n-type and 66 mV/decade for p-type), good on-current (281 A/m for n-type 149 A/m for p-type), low off-leakage current (28.1 pA/m for n-type and 79.6 pA/m for p-type), and excellent on-off ratio (1 107 for n-type and 2 106 for p-type). In addition, it is demonstrated that our fabricated V-MOSFETs can control the threshold voltage (Vth) by changing the channel doping condition, which is the useful and low-cost technique as it has been widely used in the conventional bulk planar MOSFET. This result indicates that V-MOSFETs can control Vth more finely and flexibly by the combined the use of the doping technique with other techniques such as work function engineering of metal-gate. Moreover, it is also shown that V-MOSFETs can suppress 1/f noise (L\\text{gate}WS\\text{Id}/I\\text{d}2 of 10-13-10-11 m2/Hz for n-type and 10-12-10-10 m2/Hz for p-type) to one or two order lower level than previously reported nanowire type MOSFET, FinFET, Tri-Gate, and planar MOSFETs. The results have also proved that both DC and 1/f noise performances are independent from the bias voltage which is applied to substrate or well layer. Therefore, it is verified that V-MOSFETs can eliminate the effects from substrate or well layer, which always adversely affects the circuit performances due to this serial connection.

  14. Cryogenic CMOS circuits for single charge digital readout.

    SciTech Connect

    Gurrieri, Thomas M.; Longoria, Erin Michelle; Eng, Kevin; Carroll, Malcolm S.; Hamlet, Jason R.; Young, Ralph Watson

    2010-03-01

    The readout of a solid state qubit often relies on single charge sensitive electrometry. However the combination of fast and accurate measurements is non trivial due to large RC time constants due to the electrometers resistance and shunt capacitance from wires between the cold stage and room temperature. Currently fast sensitive measurements are accomplished through rf reflectrometry. I will present an alternative single charge readout technique based on cryogenic CMOS circuits in hopes to improve speed, signal-to-noise, power consumption and simplicity in implementation. The readout circuit is based on a current comparator where changes in current from an electrometer will trigger a digital output. These circuits were fabricated using Sandia's 0.35 {micro}m CMOS foundry process. Initial measurements of comparators with an addition a current amplifier have displayed current sensitivities of < 1nA at 4.2K, switching speeds up to {approx}120ns, while consuming {approx}10 {micro}W. I will also discuss an investigation of noise characterization of our CMOS process in hopes to obtain a better understanding of the ultimate limit in signal to noise performance.

  15. Polycrystalline Mercuric Iodide Films on CMOS Readout Arrays

    PubMed Central

    Hartsough, Neal E.; Iwanczyk, Jan S.; Nygard, Einar; Malakhov, Nail; Barber, William C.; Gandhi, Thulasidharan

    2009-01-01

    We have created high-resolution x-ray imaging devices using polycrystalline mercuric iodide (HgI2) films grown directly onto CMOS readout chips using a thermal vapor transport process. Images from prototype 400400 pixel HgI2-coated CMOS readout chips are presented, where the pixel grid is 30 ?m 30 ?m. The devices exhibited sensitivity of 6.2 ?C/Rcm2 with corresponding dark current of ?2.7 nA/cm2, and a 80 ?m FWHM planar image response to a 50 ?m slit aperture. X-ray CT images demonstrate a point spread function sufficient to obtain a 50 ?m spatial resolution in reconstructed CT images at a substantially reduced dose compared to phosphor-coated readouts. The use of CMOS technology allows for small pixels (30 ?m), fast readout speeds (8 fps for a 32003200 pixel array), and future design flexibility due to the use of well-developed fabrication processes. PMID:20161098

  16. Seamless integration of CMOS and microfluidics using flip chip bonding

    NASA Astrophysics Data System (ADS)

    Welch, David; Blain Christen, Jennifer

    2013-03-01

    We demonstrate the microassembly of PDMS (polydimethylsiloxane) microfluidics with integrated circuits made in complementary metal-oxide-semiconductor (CMOS) processes. CMOS-sized chips are flip chip bonded to a flexible polyimide printed circuit board (PCB) with commercially available solder paste patterned using a SU-8 epoxy. The average resistance of each flip chip bond is negligible and all connections are electrically isolated. PDMS is attached to the flexible polyimide PCB using a combination of oxygen plasma treatment and chemical bonding with 3-aminopropyltriethoxysilane. The total device has a burst pressure of 175 kPA which is limited by the strength of the flip chip attachment. This technique allows the sensor area of the die to act as the bottom of the microfluidic channel. The SU-8 provides a barrier between the pad ring (electrical interface) and the fluids; post-processing is not required on the CMOS die. This assembly method shows great promise for developing analytic systems which combine the strengths of microelectronics and microfluidics into one device.

  17. Aluminum nitride on titanium for CMOS compatible piezoelectric transducers

    PubMed Central

    Doll, Joseph C; Petzold, Bryan C; Ninan, Biju; Mullapudi, Ravi; Pruitt, Beth L

    2010-01-01

    Piezoelectric materials are widely used for microscale sensors and actuators but can pose material compatibility challenges. This paper reports a post-CMOS compatible fabrication process for piezoelectric sensors and actuators on silicon using only standard CMOS metals. The piezoelectric properties of aluminum nitride (AlN) deposited on titanium (Ti) by reactive sputtering are characterized and microcantilever actuators are demonstrated. The film texture of the polycrystalline Ti and AlN films is improved by removing the native oxide from the silicon substrate in situ and sequentially depositing the films under vacuum to provide a uniform growth surface. The piezoelectric properties for several AlN film thicknesses are measured using laser doppler vibrometry on unpatterned wafers and released cantilever beams. The film structure and properties are shown to vary with thickness, with values of d33f, d31 and d33 of up to 2.9, −1.9 and 6.5 pm V−1, respectively. These values are comparable with AlN deposited on a Pt metal electrode, but with the benefit of a fabrication process that uses only standard CMOS metals. PMID:20333316

  18. Modification of standard CMOS technology for cell-based biosensors.

    PubMed

    Graham, A H D; Surguy, S M; Langlois, P; Bowen, C R; Taylor, J; Robbins, J

    2012-01-15

    We present an electrode based on complementary metal oxide semiconductor (CMOS) technology that can be made fully biocompatible and chemically inert using a simple, low-cost and non-specialised process. Since these devices are based on ubiquitous CMOS technology, the integrated circuits can be readily developed to include appropriate amplifiers, filters and wireless subsystems, thus reducing the complexity and cost of external systems. The unprocessed CMOS aluminium electrodes are modified using anodisation and plating techniques which do not require intricate and expensive semiconductor processing equipment and can be performed on the bench-top as a clean-room environment is not required. The resulting transducers are able to detect both the fast electrical activity of neurons and the slow changes in impedance of growing and dividing cells. By using standard semiconductor fabrication techniques and well-established technologies, the approach can form the basis of cell-based biosensors and transducers for high throughput drug discovery assays, neuroprosthetics and as a basic research tool in biosciences. The technology is equally applicable to other biosensors that require noble metal or nanoporous microelectrodes. PMID:22138468

  19. Cryogenic CMOS circuits for single charge digital readout

    NASA Astrophysics Data System (ADS)

    Eng, Kevin; Gurrieri, T. M.; Hamlet, J.; Carroll, M. S.

    2010-03-01

    The readout of a solid state qubit often relies on single charge sensitive electrometry. However the combination of fast and accurate measurements is non trivial due to large RC time constants due to the electrometers resistance and shunt capacitance from wires between the cold stage and room temperature. Currently fast sensitive measurements are accomplished through rf reflectrometry. I will present an alternative single charge readout technique based on cryogenic CMOS circuits in hopes to improve speed, signal-to-noise, power consumption and simplicity in implementation. The readout circuit is based on a current comparator where changes in current from an electrometer will trigger a digital output. These circuits were fabricated using Sandia's 0.35μm CMOS foundry process. Initial measurements of comparators with an addition a current amplifier have displayed current sensitivities of < 1nA at 4.2K, switching speeds up to ˜120ns, while consuming ˜10μW. I will also discuss an investigation of noise characterization of our CMOS process in hopes to obtain a better understanding of the ultimate limit in signal to noise performance.

  20. Latest results of the R&D on CMOS MAPS for the Layer0 of the SuperB SVT

    NASA Astrophysics Data System (ADS)

    Balestri, G.; Batignani, G.; Beck, G.; Bernardelli, A.; Berra, A.; Bettarini, S.; Bevan, |A.; Bombelli, L.; Bosi, F.; Bosisio, L.; Casarosa, G.; Ceccanti, M.; Cenci, R.; Citterio, M.; Coelli, S.; Comotti, D.; Dalla Betta, G.-F.; Fabbri, L.; Fiorini, C.; Fontana, G.; Forti, F.; Gabrielli, A.; Gaioni, L.; Gannaway, F.; Giorgi, F.; Giorgi, M. A.; Lanceri, L.; Liberali, V.; Lietti, D.; Lusiani, A.; Mammini, P.; Manazza, A.; Manghisoni, M.; Monti, M.; Morris, J.; Morsani, F.; Nasri, B.; Neri, N.; Oberhof, B.; Palombo, F.; Pancheri, L.; Paoloni, E.; Pellegrini, G.; Perez, A.; Petragnani, G.; Prest, M.; Povoli, M.; Profeti, A.; Quartieri, E.; Rashevskaya, I.; Ratti, L.; Re, V.; Rizzo, G.; Sbarra, C.; Semprini-Cesari, N.; Soldani, A.; Stabile, A.; Stella, C.; Traversi, G.; Valentinetti, S.; Verzellesi, G.; Villa, M.; Vitale, L.; Walsh, J.; Wilson, F.; Zoccoli, A.; Zucca, S.

    2013-12-01

    Physics and high background conditions set very challenging requirements on readout speed, material budget and resolution for the innermost layer of the SuperB Silicon Vertex Tracker operated at the full luminosity. Monolithic Active Pixel Sensors (MAPS) are very appealing in this application since the thin sensitive region allows grinding the substrate to tens of microns. Deep N-Well MAPS, developed in the ST 130 nm CMOS technology, achieved in-pixel sparsification and fast time stamping. Further improvements are being explored with an intense R&D program, including both vertical integration and 2D MAPS with the INMAPS quadruple well. We present the results of the characterization with IR laser, radioactive sources and beam of several chips produced with the 3D (Chartered/Tezzaron) process. We have also studied prototypes exploiting the features of the quadruple well and the high resistivity epitaxial layer of the INMAPS 180 nm process. Promising results from an irradiation campaign with neutrons on small matrices and other test-structures, as well as the response of the sensors to high energy charged tracks are presented.

  1. Neutron spectrum and dose in a CMOS

    NASA Astrophysics Data System (ADS)

    Vega-Carrillo, H. R.; Paredes-Gutierrez, L.; Borja-Hernandez, C. G.

    2012-10-01

    Using Monte Carlo methods the neutron spectrum in a pacemaker's CMOS has been estimated. A 18 MV LINAC model was used to expose a cell used to define the prostate located in a tissue equivalent phantom model. Neutron fluence at the CMOS is 2.6E(7) n/cm2-Gyx, the spectrum has thermal, epithermal and fast neutrons that will induce secondary, low and high LET, particles whose ionization could induce malfunction and failure of pacemaker in the oncological patient.

  2. Comprehensive Matching Characterization of Analog CMOS Circuits

    NASA Astrophysics Data System (ADS)

    Masuda, Hiroo; Kida, Takeshi; Ohkawa, Shin-Ichi

    A new analog mismatch model in circuit level has been developed. MOS transistor's small signal parameters are modeled in term of their matching character for both strong- and weak-inversion operations. Mismatch analysis on basic CMOS amplifiers are conducted with proposed model and Monte Carlo SPICE simulations. We successfully derived simple analytical formula on performance mismatch for analog CMOS circuits, which is verified to be accurate in using actual analog circuit design, within an average error of less than 10%.

  3. CMOS Integrated Nanophotonics for Future Computing Systems

    NASA Astrophysics Data System (ADS)

    Vlasov, Yurii A.

    2011-10-01

    CMOS Integrated Nanophotonics allows ultra-dense monolithic single-chip integration of optical and electrical functions. This technology can enable future Exaflops supercomputers by connecting racks, modules, and chips together with ultra-low power massively parallel optical interconnects. I will describe the progress this field witnessed during last several years starting from explorations of fundamental optical phenomena at the nanoscale through development of advanced nanophotonics devices to demonstration of advanced optoelectronic systems integrated into a single CMOS die.

  4. Multi-target electrochemical biosensing enabled by integrated CMOS electronics

    NASA Astrophysics Data System (ADS)

    Rothe, J.; Lewandowska, M. K.; Heer, F.; Frey, O.; Hierlemann, A.

    2011-05-01

    An integrated electrochemical measurement system, based on CMOS technology, is presented, which allows the detection of several analytes in parallel (multi-analyte) and enables simultaneous monitoring at different locations (multi-site). The system comprises a 576-electrode CMOS sensor chip, an FPGA module for chip control and data processing, and the measurement laptop. The advantages of the highly versatile system are demonstrated by two applications. First, a label-free, hybridization-based DNA sensor is enabled by the possibility of large-scale integration in CMOS technology. Second, the detection of the neurotransmitter choline is presented by assembling the chip with biosensor microprobe arrays. The low noise level enables a limit of detection of, e.g., 0.3 M choline. The fully integrated system is self-contained: it features cleaning, functionalization and measurement functions without the need for additional electrical equipment. With the power supplied by the laptop, the system is very suitable for on-site measurements.

  5. Fully depleted, thick, monolithic CMOS pixels with high quantum efficiency

    NASA Astrophysics Data System (ADS)

    Clarke, A.; Stefanov, K.; Johnston, N.; Holland, A.

    2015-04-01

    The Centre for Electronic Imaging (CEI) has an active programme of evaluating and designing Complementary Metal-Oxide Semiconductor (CMOS) image sensors with high quantum efficiency, for applications in near-infrared and X-ray photon detection. This paper describes the performance characterisation of CMOS devices made on a high resistivity 50 μ m thick p-type substrate with a particular focus on determining the depletion depth and the quantum efficiency. The test devices contain 8 × 8 pixel arrays using CCD-style charge collection, which are manufactured in a low voltage CMOS process by ESPROS Photonics Corporation (EPC). Measurements include determining under which operating conditions the devices become fully depleted. By projecting a spot using a microscope optic and a LED and biasing the devices over a range of voltages, the depletion depth will change, causing the amount of charge collected in the projected spot to change. We determine if the device is fully depleted by measuring the signal collected from the projected spot. The analysis of spot size and shape is still under development.

  6. CMOS Alcohol Sensor Employing ZnO Nanowire Sensing Films

    NASA Astrophysics Data System (ADS)

    Santra, S.; Ali, S. Z.; Guha, P. K.; Hiralal, P.; Unalan, H. E.; Dalal, S. H.; Covington, J. A.; Milne, W. I.; Gardner, J. W.; Udrea, F.

    2009-05-01

    This paper reports on the utilization of zinc oxide nanowires (ZnO NWs) on a silicon on insulator (SOI) CMOS micro-hotplate for use as an alcohol sensor. The device was designed in Cadence and fabricated in a 1.0 ?m SOI CMOS process at XFAB (Germany). The basic resistive gas sensor comprises of a metal micro-heater (made of aluminum) embedded in an ultra-thin membrane. Gold plated aluminum electrodes, formed of the top metal, are used for contacting with the sensing material. This design allows high operating temperatures with low power consumption. The membrane was formed by using deep reactive ion etching. ZnO NWs were grown on SOI CMOS substrates by a simple and low-cost hydrothermal method. A few nanometer of ZnO seed layer was first sputtered on the chips, using a metal mask, and then the chips were dipped in a zinc nitrate hexahydrate and hexamethylenetramine solution at 90 C to grow ZnO NWs. The chemical sensitivity of the on-chip NWs were studied in the presence of ethanol (C2H5OH) vapour (with 10% relative humidity) at two different temperatures: 200 and 250 C (the corresponding power consumptions are only 18 and 22 mW). The concentrations of ethanol vapour were varied from 175-1484 ppm (pers per million) and the maximum response was observed 40% (change in resistance in %) at 786 ppm at 250 C. These preliminary measurements showed that the on-chip deposited ZnO NWs could be a promising material for a CMOS based ethanol sensor.

  7. Application of CMOS APS in star tracker

    NASA Astrophysics Data System (ADS)

    Liu, Zhi; Wang, Yefan; Yang, Jingyi; Hao, Zhihang

    2002-09-01

    Small satellites are now capable of performing missions that require accurate attitude determination and control. However, low weight, size, power, and cost requirements limit the types of attitude sensors that can be used on a small craft, making attitude estimation difficult. In particular, star trackers -- often the attitude sensors of choice for spacecraft, ballistic missile etc., are not practical for small satellites, and CMOS APS is a good substitute for attitude sensors. Some of the technical advantages of CMOS APS are no blooming, low power consumption, direct digital output, small size and little support circuitry, simple to design, etc. This paper discusses the application probability of CMOS APS technology in star tracker for use in small satellites. A ground-based prototype vision system based on CMOS APS has been built to demonstrate the advantages of using CMOS APS in star tracker. Resolving capability, noise, radiation hardening and some other characteristics are discussed in detail. CMOS image sensor is sure to be a potential replacement of CCD in the field of attitude sensors.

  8. CMOS compatible avalanche photodetector and its application in communications

    NASA Astrophysics Data System (ADS)

    Tang, Miangang; Wu, Zhigang; Li, Guohui

    2014-11-01

    CMOS compatible avalanche photodiodes (CMOS APDs) can be fabricated with standard CMOS technology, which make CMOS APDs are considered as a key optoelectronic device for optical communication systems and optical wireless communication systems. The guard-ring (GR) structure in CMOS APDs can alleviate the premature edge breakdown (PEB) effects and greatly improve the device performance. In this paper, the influence of various type GR structure on CMOS APDs performance are discussed, and its important applications in radio-over-fibre (RoF) are reviewed.

  9. Flexible packaging and integration of CMOS IC with elastomeric microfluidics

    NASA Astrophysics Data System (ADS)

    Zhang, Bowei; Dong, Quan; Korman, Can E.; Li, Zhenyu; Zaghloul, Mona E.

    2013-05-01

    We have demonstrated flexible packaging and integration of CMOS IC chips with PDMS microfluidics. Microfluidic channels are used to deliver both liquid samples and liquid metals to the CMOS die. The liquid metals are used to realize electrical interconnects to the CMOS chip. As a demonstration we integrated a CMOS magnetic sensor die and matched PDMS microfluidic channels in a flexible package. The packaged system is fully functional under 3cm bending radius. The flexible integration of CMOS ICs with microfluidics enables previously unavailable flexible CMOS electronic systems with fluidic manipulation capabilities, which hold great potential for wearable health monitoring, point-of-care diagnostics and environmental sensing.

  10. CMOS compatible thin-film ALD tungsten nanoelectromechanical devices

    NASA Astrophysics Data System (ADS)

    Davidson, Bradley Darren

    This research focuses on the development of a novel, low-temperature, CMOS compatible, atomic-layer-deposition (ALD) enabled NEMS fabrication process for the development of ALD Tungsten (WALD) NEMS devices. The devices are intended for use in CMOS/NEMS hybrid systems, and NEMS based micro-processors/controllers capable of reliable operation in harsh environments not accessible to standard CMOS technologies. The majority of NEMS switches/devices to date have been based on carbon-nano-tube (CNT) designs. The devices consume little power during actuation, and as expected, have demonstrated actuation voltages much smaller than MEMS switches. Unfortunately, NEMS CNT switches are not typically CMOS integrable due to the high temperatures required for their growth, and their fabrication typically results in extremely low and unpredictable yields. Thin-film NEMS devices offer great advantages over reported CNT devices for several reasons, including: higher fabrication yields, low-temperature (CMOS compatible) deposition techniques like ALD, and increased control over design parameters/device performance metrics, i.e., device geometry. Furthermore, top-down, thin-film, nano-fabrication techniques are better capable of producing complicated device geometries than CNT based processes, enabling the design and development of multi-terminal switches well-suited for low-power hybrid NEMS/CMOS systems as well as electromechanical transistors and logic devices for use in temperature/radiation hard computing architectures. In this work several novel, low-temperature, CMOS compatible fabrication technologies, employing WALD as a structural layer for MEMS or NEMS devices, were developed. The technologies developed are top-down nano-scale fabrication processes based on traditional micro-machining techniques commonly used in the fabrication of MEMS devices. Using these processes a variety of novel WALD NEMS devices have been successfully fabricated and characterized. Using two different WALD fabrication technologies two generations of 2-terminal WALD NEMS switches have been developed. These devices have functional gap heights of 30-50 nm, and actuation voltages typically ranging from 3--5 Volts. Via the extension of a two terminal WALD technology novel 3-terminal WALD NEMS devices were developed. These devices have actuation voltages ranging from 1.5--3 Volts, reliabilities in excess of 2 million cycles, and have been designed to be the fundamental building blocks for WALD NEMS complementary inverters. Through the development of these devices several advancements in the modeling and design of thin-film NEMS devices were achieved. A new model was developed to better characterize pre-actuation currents commonly measured for NEMS switches with nano-scale gate-to-source gap heights. The developed model is an extension of the standard field-emission model and considers the electromechanical response, and electric field effects specific to thin-film NEMS switches. Finally, a multi-physics FEM/FD based model was developed to simulate the dynamic behavior of 2 or 3-terminal electrostatically actuated devices whose electrostatic domains have an aspect ratio on the order of 10-3. The model uses a faux-Lagrangian finite difference method to solve Laplaces equation in a quasi-statatically deforming domain. This model allows for the numerical characterization and design of thin-film NEMS devices not feasible using typical non-specialized BEM/FEM based software. Using this model several novel and feasible designs for fixed-fixed 3-terminal WALD NEMS switches capable for the construction of complementary inverters were discovered.

  11. Nanostructured metallic surfaces for enhanced transmission and polarization filtering in CMOS fabricated photodetectors

    NASA Astrophysics Data System (ADS)

    Dunbar, L. A.; Guillaumée, M.; de León-Pérez, F.; Rüedi, P.-F.; Spassov, V.; Eckert, R.; Lopez-Tejeira, F.; García-Vidal, F. J.; Franzi, E.; Martín-Moreno, L.; Stanley, R. P.

    2010-05-01

    The miniaturization of photodetectors often comes at the expense of a smaller photosensitive area. This can reduce the signal and thus limit the image quality. One way to overcome this limitation is to reduce the photosensitive area but with no reduction of signal i.e. harvest the light. Here we investigate, theoretically and experimentally, light harvesting with nanostructured metals. Nanostructured metals can also give additional functionality such as polarization filtering which is also investigated. After defining the figure of merits used when characterizing light harvesting and polarization filtering structures, we detail the fabrication and measurement process. Structures were made on glass substrate, as a post process step on CMOS fabricated detectors and directly in the CMOS fabrication of the detectors. The optical characterization results are presented and compared with theory. Finally, we discuss the challenges and advantages of integrating metallic nanostructures within the CMOS process.

  12. Multiband CMOS sensor simplify FPA design

    NASA Astrophysics Data System (ADS)

    Wang, Weng Lyang B.; Ling, Jer

    2015-10-01

    Push broom multi-band Focal Plane Array (FPA) design needs to consider optics, image sensor, electronic, mechanic as well as thermal. Conventional FPA use two or several CCD device as an image sensor. The CCD image sensor requires several high speed, high voltage and high current clock drivers as well as analog video processors to support their operation. Signal needs to digitize using external sample / hold and digitized circuit. These support circuits are bulky, consume a lot of power, must be shielded and placed in close to the CCD to minimize the introduction of unwanted noise. The CCD also needs to consider how to dissipate power. The end result is a very complicated FPA and hard to make due to more weighs and draws more power requiring complex heat transfer mechanisms. In this paper, we integrate microelectronic technology and multi-layer soft / hard Printed Circuit Board (PCB) technology to design electronic portion. Since its simplicity and integration, the optics, mechanic, structure and thermal design will become very simple. The whole FPA assembly and dis-assembly reduced to a few days. A multi-band CMOS Sensor (dedicated as C468) was used for this design. The CMOS Sensor, allow for the incorporation of clock drivers, timing generators, signal processing and digitization onto the same Integrated Circuit (IC) as the image sensor arrays. This keeps noise to a minimum while providing high functionality at reasonable power levels. The C468 is a first Multiple System-On-Chip (MSOC) IC. This device used our proprietary wafer butting technology and MSOC technology to combine five long sensor arrays into a size of 120 mm x 23.2 mm and 155 mm x 60 mm for chip and package, respectively. The device composed of one Panchromatic (PAN) and four different Multi- Spectral (MS) sensors. Due to its integration on the electronic design, a lot of room is clear for the thermal design. The optical and mechanical design is become very straight forward. The flight model FPA passed all of the reliability testing.

  13. New package for CMOS sensors

    NASA Astrophysics Data System (ADS)

    Diot, Jean-Luc; Loo, Kum Weng; Moscicki, Jean-Pierre; Ng, Hun Shen; Tee, Tong Yan; Teysseyre, Jerome; Yap, Daniel

    2004-02-01

    Cost is the main drawback of existing packages for C-MOS sensors (mainly CLCC family). Alternative packages are thus developed world-wide. And in particular, S.T.Microelectronics has studied a low cost alternative packages based on QFN structure, still with a cavity. Intensive work was done to optimize the over-molding operation forming the cavity onto a metallic lead-frame (metallic lead-frame is a low cost substrate allowing very good mechanical definition of the final package). Material selection (thermo-set resin and glue for glass sealing) was done through standard reliability tests for cavity packages (Moisture Sensitivity Level 3 followed by temperature cycling, humidity storage and high temperature storage). As this package concept is new (without leads protruding the molded cavity), the effect of variation of package dimensions, as well as board lay-out design, are simulated on package life time (during temperature cycling, thermal mismatch between board and package leads to thermal fatigue of solder joints). These simulations are correlated with an experimental temperature cycling test with daisy-chain packages.

  14. Future of nano CMOS technology

    NASA Astrophysics Data System (ADS)

    Iwai, Hiroshi

    2015-10-01

    Although Si MOS devices have dominated the integrated circuit applications over the four decades, it has been anticipated that the development of CMOS would reach its limits after the next decade because of the difficulties in the technologies for further downscaling and also because of some fundamental limits of MOSFETs. However, there have been no promising candidates yet, which can replace Si MOSFETs with better performance with low cost. Thus, for the moment, it seems that we have to stick to the Si MOSFET devices until their end. The downsizing is limited by the increase of off-leakage current between source and drain. In order to suppress the off-leakage current, multi-gate structures (FinFET, Tri-gate, and Si-nanowire MOSFETs) are replacing conventional planar MOSFETs, and continuous innovation of high-k/metal gate technologies has enabled EOT scaling down to 0.9 nm in production. However, it was found that the multi-gate structures have a future big problem of significant conduction reduction with decrease in fin width. Also it is not easy to further decrease EOT because of the mobility and reliability degradation. Furthermore, the development of EUV (Extremely Ultra-Violet) lithography, which is supposed to be essential for sub-10 nm lithography, delays significantly because of insufficient illumination intensity for production. Thus, it is now expected that the reduction rate of the gate length, which has a strong influence on the off-leakage current, will become slower in near future.

  15. NSC 800, 8-bit CMOS microprocessor

    NASA Technical Reports Server (NTRS)

    Suszko, S. F.

    1984-01-01

    The NSC 800 is an 8-bit CMOS microprocessor manufactured by National Semiconductor Corp., Santa Clara, California. The 8-bit microprocessor chip with 40-pad pin-terminals has eight address buffers (A8-A15), eight data address -- I/O buffers (AD(sub 0)-AD(sub 7)), six interrupt controls and sixteen timing controls with a chip clock generator and an 8-bit dynamic RAM refresh circuit. The 22 internal registers have the capability of addressing 64K bytes of memory and 256 I/O devices. The chip is fabricated on N-type (100) silicon using self-aligned polysilicon gates and local oxidation process technology. The chip interconnect consists of four levels: Aluminum, Polysi 2, Polysi 1, and P(+) and N(+) diffusions. The four levels, except for contact interface, are isolated by interlevel oxide. The chip is packaged in a 40-pin dual-in-line (DIP), side brazed, hermetically sealed, ceramic package with a metal lid. The operating voltage for the device is 5 V. It is available in three operating temperature ranges: 0 to +70 C, -40 to +85 C, and -55 to +125 C. Two devices were submitted for product evaluation by F. Stott, MTS, JPL Microprocessor Specialist. The devices were pencil-marked and photographed for identification.

  16. Simulation of SEU transients in CMOS ICs

    SciTech Connect

    Kaul, N.; Bhuva, B.L.; Kerns, S.E. )

    1991-12-01

    This paper reports that available analytical models of the number of single-event-induced errors (SEU) in combinational logic systems are not easily applicable to real integrated circuits (ICs). An efficient computer simulation algorithm set, SITA, predicts the vulnerability of data stored in and processed by complex combinational logic circuits to SEU. SITA is described in detail to allow researchers to incorporate it into their error analysis packages. Required simulation algorithms are based on approximate closed-form equations modeling individual device behavior in CMOS logic units. Device-level simulation is used to estimate the probability that ion-device interactions produce erroneous signals capable of propagating to a latch (or n output node), and logic-level simulation to predict the spread of such erroneous, latched information through the IC. Simulation results are compared to those from SPICE for several circuit and logic configurations. SITA results are comparable to this established circuit-level code, and SITA can analyze circuits with state-of-the-art device densities (which SPICE cannot). At all IC complexity levels, SITAS offers several factors of 10 savings in simulation time over SPICE.

  17. Dielectrophoretic lab-on-CMOS platform for trapping and manipulation of cells.

    PubMed

    Park, Kyoungchul; Kabiri, Shideh; Sonkusale, Sameer

    2016-02-01

    Trapping and manipulation of cells are essential operations in numerous studies in biology and life sciences. We discuss the realization of a Lab-on-a-Chip platform for dielectrophoretic trapping and repositioning of cells and microorganisms on a complementary metal oxide semiconductor (CMOS) technology, which we define here as Lab-on-CMOS (LoC). The LoC platform is based on dielectrophoresis (DEP) which is the force experienced by any dielectric particle including biological entities in non-uniform AC electrical field. DEP force depends on the permittivity of the cells, its size and shape and also on the permittivity of the medium and therefore it enables selective targeting of cells based on their phenotype. In this paper, we address an important matter that of electrode design for DEP for which we propose a three-dimensional (3D) octapole geometry to create highly confined electric fields for trapping and manipulation of cells. Conventional DEP-based platforms are implemented stand-alone on glass, silicon or polymers connected to external infrastructure for electronics and optics, making it bulky and expensive. In this paper, the use of CMOS as a platform provides a pathway to truly miniaturized lab-on-CMOS or LoCplatform, where DEP electrodes are designed using built-in multiple metal layers of the CMOS process for effective trapping of cells, with built-in electronics for in-situ impedance monitoring of the cell position. We present electromagnetic simulation results of DEP force for this unique 3D octapole geometry on CMOS. Experimental results with yeast cells validate the design. These preliminary results indicate the promise of using CMOS technology for truly compact miniaturized lab-on-chip platform for cell biotechnology applications. PMID:26780441

  18. Deposition of titanium dioxide nanoparticles on the membrane of a CMOS-MEMS resonator

    NASA Astrophysics Data System (ADS)

    Ahmed, A. Y.; Dennis, J. O.; Khir, M. H. Md; Saad, M. N. Mohamad

    2014-10-01

    A CMOS-MEMS resonator is optimized as a highly sensitive gas sensor. The principle of detection is based on change in resonant frequency of the resonator due to adsorption/absorption of trace gases onto the active material on the resonator membrane. The resonator was successfully fabricated using 0.35 ?m CMOS technology and post-CMOS micromachining process. The post-CMOS process is used to etch the silicon substrate and silicon oxide to release the suspended structures of the devices. Preliminary trials of nanocrystalline Titania paste (TiO2) was screen-printed on three aluminum plates of sizes 2mm 2 mm. One of the samples was analysed as prepared while the other two samples were sintered at 300C and 550C, respectively. Physical observation indicated a change of the color for heated samples as compared to the unheated one. EDX results indicates a carbon (C) peak with average weight % of 18.816 in the as prepared sample and absence of the peaks for the samples sintered at 300C and 550C. EDX results also show that the TiO2 used consists of a uniform distribution of spherical shaped nanoparticles with a diameter of about 13.49 to 48.42 nm. Finally, the Titania paste was successfully deposit on the membrane of the CMOS-MEMS resonator for use as the gas sensitive membrane of the sensor.

  19. 60-GHz array antenna with standard CMOS technology on Schott Borofloat

    NASA Astrophysics Data System (ADS)

    Jun, Luo; Yan, Wang; Ruifeng, Yue

    2013-11-01

    This design is presented of a 2 2 planar array, with a half-wave dipole antenna to be its element, on a new substrate material, Schott Borofloat, with CMOS technology in the 60 GHz band. In the proposed structure, all the designs are based on the CMOS technology and similar performance could be achieved with the same size in contrast to the design on low-temperature co-fired ceramic (LTCC). This could lead to the improving of the compatibility with the CMOS IC process, the design cost and the design precision which is restricted in the LTCC process. The simulated -10 dB bandwidth of the array is from 58 to 64 GHz. A peak gain of 9.4 dBi is achieved. Good agreement on return loss is achieved between simulations and measurements.

  20. Volumetric imaging using single chip integrated CMUT-on-CMOS IVUS array.

    PubMed

    Tekes, Coskun; Zahorian, Jaime; Gurun, Gokce; Satir, Sarp; Xu, Toby; Hochman, Michael; Degertekin, F Levent

    2012-01-01

    An intravascular ultrasound (IVUS) catheter that can provide forward viewing volumetric ultrasound images would be an invaluable clinical tool for guiding interventions. Single chip integration of front-end electronics with capacitive micromachined ultrasonic transducers (CMUTs) is highly desirable to reduce the interconnection complexity and enable miniaturization in IVUS catheters. For this purpose we use the monolithic CMUT-on-CMOS integration where CMUTs are fabricated directly on top of pre-processed CMOS wafers. This minimizes parasitic capacitances associated with connection lines. We have recently implemented a system design including all the required electronics using 0.35-m CMOS process integrated with a 1.4-mm diameter CMUT array. In this study, we present the experimental volumetric imaging results from an ex-vivo chicken heart phantom. The imaging results demonstrate that the single-chip forward looking IVUS (FL-IVUS) system with monolithically integrated electronics has potential to visualize the front view of coronary arteries. PMID:23366605

  1. A scalable neural chip with synaptic electronics using CMOS integrated memristors

    NASA Astrophysics Data System (ADS)

    Cruz-Albrecht, Jose M.; Derosier, Timothy; Srinivasa, Narayan

    2013-09-01

    The design and simulation of a scalable neural chip with synaptic electronics using nanoscale memristors fully integrated with complementary metal-oxide-semiconductor (CMOS) is presented. The circuit consists of integrate-and-fire neurons and synapses with spike-timing dependent plasticity (STDP). The synaptic conductance values can be stored in memristors with eight levels, and the topology of connections between neurons is reconfigurable. The circuit has been designed using a 90 nm CMOS process with via connections to on-chip post-processed memristor arrays. The design has about 16 million CMOS transistors and 73?728 integrated memristors. We provide circuit level simulations of the entire chip performing neuronal and synaptic computations that result in biologically realistic functional behavior.

  2. Label free sensing of creatinine using a 6 GHz CMOS near-field dielectric immunosensor.

    PubMed

    Guha, S; Warsinke, A; Tientcheu, Ch M; Schmalz, K; Meliani, C; Wenger, Ch

    2015-05-01

    In this work we present a CMOS high frequency direct immunosensor operating at 6 GHz (C-band) for label free determination of creatinine. The sensor is fabricated in standard 0.13 ?m SiGe:C BiCMOS process. The report also demonstrates the ability to immobilize creatinine molecules on a Si3N4 passivation layer of the standard BiCMOS/CMOS process, therefore, evading any further need of cumbersome post processing of the fabricated sensor chip. The sensor is based on capacitive detection of the amount of non-creatinine bound antibodies binding to an immobilized creatinine layer on the passivated sensor. The chip bound antibody amount in turn corresponds indirectly to the creatinine concentration used in the incubation phase. The determination of creatinine in the concentration range of 0.88-880 ?M is successfully demonstrated in this work. A sensitivity of 35 MHz/10 fold increase in creatinine concentration (during incubation) at the centre frequency of 6 GHz is gained by the immunosensor. The results are compared with a standard optical measurement technique and the dynamic range and sensitivity is of the order of the established optical indication technique. The C-band immunosensor chip comprising an area of 0.3 mm(2) reduces the sensing area considerably, therefore, requiring a sample volume as low as 2 ?l. The small analyte sample volume and label free approach also reduce the experimental costs in addition to the low fabrication costs offered by the batch fabrication technique of CMOS/BiCMOS process. PMID:25782697

  3. Noise Immunity Improvement in Dynamic CMOS circuits

    NASA Astrophysics Data System (ADS)

    Khare, Kavita; Ambulker, Sunanda

    2010-11-01

    For the purpose of high system performance dynamic CMOS circuits are widely use in high performance VLSI chips. But dynamic CMOS gates are found to be less noise resistant then static CMOS gates. Due to aggressive technology scaling, stringent noise requirement has been increased, hence the noise tolerance of dynamic circuits has to be first improved for the over all reliable operation of VLSI chip. A new technique (Transparency window technique) which increases the noise immunity with the precharge of one internal node of N-logic and isolating the precharge dynamic node-and consequently the output from the inputs during the evaluation phase, is introduced to improve the noise tolerance of digital circuits. Simulation result on Pspice 9.1 and 0.65 μm technology shows that this technique improves noise immunity of the dynamic circuits as compared to conventional and previous noise tolerance technique.

  4. Spectrometry with consumer-quality CMOS cameras.

    PubMed

    Scheeline, Alexander

    2015-01-01

    Many modern spectrometric instruments use diode arrays, charge-coupled arrays, or CMOS cameras for detection and measurement. As portable or point-of-use instruments are desirable, one would expect that instruments using the cameras in cellular telephones and tablet computers would be the basis of numerous instruments. However, no mass market for such devices has yet developed. The difficulties in using megapixel CMOS cameras for scientific measurements are discussed, and promising avenues for instrument development reviewed. Inexpensive alternatives to use of the built-in camera are also mentioned, as the long-term question is whether it is better to overcome the constraints of CMOS cameras or to bypass them. PMID:25626545

  5. Low power, CMOS digital autocorrelator spectrometer for spaceborne applications

    NASA Technical Reports Server (NTRS)

    Chandra, Kumar; Wilson, William J.

    1992-01-01

    A 128-channel digital autocorrelator spectrometer using four 32 channel low power CMOS correlator chips was built and tested. The CMOS correlator chip uses a 2-bit multiplication algorithm and a full-custom CMOS VLSI design to achieve low DC power consumption. The digital autocorrelator spectrometer has a 20 MHz band width, and the total DC power requirement is 6 Watts.

  6. High-temperature Complementary Metal Oxide Semiconductors (CMOS)

    NASA Technical Reports Server (NTRS)

    Mcbrayer, J. D.

    1981-01-01

    The results of an investigation into the possibility of using complementary metal oxide semiconductor (CMOS) technology for high temperature electronics are presented. A CMOS test chip was specifically developed as the test bed. This test chip incorporates CMOS transistors that have no gate protection diodes; these diodes are the major cause of leakage in commercial devices.

  7. Resistor Extends Life Of Battery In Clocked CMOS Circuit

    NASA Technical Reports Server (NTRS)

    Wells, George H., Jr.

    1991-01-01

    Addition of fixed resistor between battery and clocked complementary metal oxide/semiconductor (CMOS) circuit reduces current drawn from battery. Basic idea to minimize current drawn from battery by operating CMOS circuit at lowest possible current consistent with use of simple, fixed off-the-shelf components. Prolongs lives of batteries in such low-power CMOS circuits as watches and calculators.

  8. Self-Vth-Cancellation High-Efficiency CMOS Rectifier Circuit for UHF RFIDs

    NASA Astrophysics Data System (ADS)

    Kotani, Koji; Ito, Takashi

    A high-efficiency CMOS rectifier circuit for UHF RFID applications was developed. The rectifier utilizes a self-Vth-cancellation (SVC) scheme in which the threshold voltage of MOSFETs is cancelled by applying gate bias voltage generated from the output voltage of the rectifier itself. A very simple circuit configuration and zero power dissipation characteristics in biasing enable excellent power conversion efficiency (PCE), especially under small RF input power conditions. At higher RF input power conditions, the PCE of the rectifier automatically decreases. This is the built-in self-power-regulation function. The proposed SVC CMOS rectifier was fabricated with a 0.35-m CMOS process and the measured performance was compared with those of conventional nMOS, pMOS, and CMOS rectifiers and other types of Vth cancellation rectifiers as well. The SVC CMOS rectifier achieves 32% of PCE at the -10dBm RF input power condition. This PCE is larger than rectifiers reported to date under this condition.

  9. A high speed CMOS A/D converter

    NASA Technical Reports Server (NTRS)

    Wiseman, Don R.; Whitaker, Sterling R.

    1992-01-01

    This paper presents a high speed analog-to-digital (A/D) converter. The converter is a 7 bit flash converter with one half LSB accuracy. Typical parts will function at approximately 200 MHz. The converter uses a novel comparator circuit that is shown to out perform more traditional comparators, and thus increases the speed of the converter. The comparator is a clocked, precharged circuit that offers very fast operation with a minimal offset voltage (2 mv). The converter was designed using a standard 1 micron digital CMOS process and is 2,244 microns by 3,972 microns.

  10. Performance Analysis of Visible Light Communication Using CMOS Sensors.

    PubMed

    Do, Trong-Hop; Yoo, Myungsik

    2016-01-01

    This paper elucidates the fundamentals of visible light communication systems that use the rolling shutter mechanism of CMOS sensors. All related information involving different subjects, such as photometry, camera operation, photography and image processing, are studied in tandem to explain the system. Then, the system performance is analyzed with respect to signal quality and data rate. To this end, a measure of signal quality, the signal to interference plus noise ratio (SINR), is formulated. Finally, a simulation is conducted to verify the analysis. PMID:26938535

  11. Optical addressing technique for a CMOS RAM

    NASA Technical Reports Server (NTRS)

    Wu, W. H.; Bergman, L. A.; Allen, R. A.; Johnston, A. R.

    1988-01-01

    Progress on optically addressing a CMOS RAM for a feasibility demonstration of free space optical interconnection is reported in this paper. The optical RAM chip has been fabricated and functional testing is in progress. Initial results seem promising. New design and SPICE simulation of optical gate cell (OGC) circuits have been carried out to correct the slow fall time of the 'weak pull down' OGC, which has been characterized experimentally. Methods of reducing the response times of the photodiodes and the associated circuits are discussed. Even with the current photodiode, it appears that an OGC can be designed with a performance that is compatible with a CMOS circuit such as the RAM.

  12. Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique

    PubMed Central

    Kao, Pin-Hsu; Dai, Ching-Liang; Hsu, Cheng-Chih; Wu, Chyan-Chyi

    2009-01-01

    In this study we used the commercial 0.35 ?m CMOS (complementary metal oxide semiconductor) process and simple maskless post-processing to fabricate an array of micromirrors exhibiting high natural frequency. The micromirrors were manufactured from aluminum; the sacrificial layer was silicon dioxide. Because we fabricated the micromirror arrays using the standard CMOS process, they have the potential to be integrated with circuitry on a chip. For post-processing we used an etchant to remove the sacrificial layer and thereby suspend the micromirrors. The micromirror array contained a circular membrane and four fixed beams set symmetrically around and below the circular mirror; these four fan-shaped electrodes controlled the tilting of the micromirror. A MEMS (microelectromechanical system) motion analysis system and a confocal 3D-surface topography were used to characterize the properties and configuration of the micromirror array. Each micromirror could be rotated in four independent directions. Experimentally, we found that the micromirror had a tilting angle of about 2.55 when applying a driving voltage of 40 V. The natural frequency of the micromirrors was 59.1 kHz. PMID:22454581

  13. Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique.

    PubMed

    Kao, Pin-Hsu; Dai, Ching-Liang; Hsu, Cheng-Chih; Wu, Chyan-Chyi

    2009-01-01

    In this study we used the commercial 0.35 ?m CMOS (complementary metal oxide semiconductor) process and simple maskless post-processing to fabricate an array of micromirrors exhibiting high natural frequency. The micromirrors were manufactured from aluminum; the sacrificial layer was silicon dioxide. Because we fabricated the micromirror arrays using the standard CMOS process, they have the potential to be integrated with circuitry on a chip. For post-processing we used an etchant to remove the sacrificial layer and thereby suspend the micromirrors. The micromirror array contained a circular membrane and four fixed beams set symmetrically around and below the circular mirror; these four fan-shaped electrodes controlled the tilting of the micromirror. A MEMS (microelectromechanical system) motion analysis system and a confocal 3D-surface topography were used to characterize the properties and configuration of the micromirror array. Each micromirror could be rotated in four independent directions. Experimentally, we found that the micromirror had a tilting angle of about 2.55 when applying a driving voltage of 40 V. The natural frequency of the micromirrors was 59.1 kHz. PMID:22454581

  14. A CMOS image sensor with stacked photodiodes for lensless observation system of digital enzyme-linked immunosorbent assay

    NASA Astrophysics Data System (ADS)

    Takehara, Hironari; Miyazawa, Kazuya; Noda, Toshihiko; Sasagawa, Kiyotaka; Tokuda, Takashi; Kim, Soo Hyeon; Iino, Ryota; Noji, Hiroyuki; Ohta, Jun

    2014-01-01

    A CMOS image sensor with stacked photodiodes was fabricated using 0.18 µm mixed signal CMOS process technology. Two photodiodes were stacked at the same position of each pixel of the CMOS image sensor. The stacked photodiodes consist of shallow high-concentration N-type layer (N+), P-type well (PW), deep N-type well (DNW), and P-type substrate (P-sub). PW and P-sub were shorted to ground. By monitoring the voltage of N+ and DNW individually, we can observe two monochromatic colors simultaneously without using any color filters. The CMOS image sensor is suitable for fluorescence imaging, especially contact imaging such as a lensless observation system of digital enzyme-linked immunosorbent assay (ELISA). Since the fluorescence increases with time in digital ELISA, it is possible to observe fluorescence accurately by calculating the difference from the initial relation between the pixel values for both photodiodes.

  15. Prototyping of an HV-CMOS demonstrator for the High Luminosity-LHC upgrade

    NASA Astrophysics Data System (ADS)

    Vilella, E.; Benoit, M.; Casanova, R.; Casse, G.; Ferrere, D.; Iacobucci, G.; Peric, I.; Vossebeld, J.

    2016-01-01

    HV-CMOS sensors can offer important advantages in terms of material budget, granularity and cost for large area tracking systems in high energy physics experiments. This article presents the design and simulated results of an HV-CMOS pixel demonstrator for the High Luminosity-LHC. The pixel demonstrator has been designed in the 0.35 ?m HV-CMOS process from ams AG and submitted for fabrication through an engineering run. To improve the response of the sensor, different wafers with moderate to high substrate resistivities are used to fabricate the design. The prototype consists of four large analog and standalone matrices with several pixel flavours, which are all compatible for readout with the FE-I4 ASIC. Details about the matrices and the pixel flavours are provided in this article.

  16. Verilog-A Device Models for Cryogenic Temperature Operation of Bulk Silicon CMOS Devices

    NASA Technical Reports Server (NTRS)

    Akturk, Akin; Potbhare, Siddharth; Goldsman, Neil; Holloway, Michael

    2012-01-01

    Verilog-A based cryogenic bulk CMOS (complementary metal oxide semiconductor) compact models are built for state-of-the-art silicon CMOS processes. These models accurately predict device operation at cryogenic temperatures down to 4 K. The models are compatible with commercial circuit simulators. The models extend the standard BSIM4 [Berkeley Short-channel IGFET (insulated-gate field-effect transistor ) Model] type compact models by re-parameterizing existing equations, as well as adding new equations that capture the physics of device operation at cryogenic temperatures. These models will allow circuit designers to create optimized, reliable, and robust circuits operating at cryogenic temperatures.

  17. Second Generation Monolithic Full-depletion Radiation Sensor with Integrated CMOS Circuitry

    SciTech Connect

    Segal, J.D.; Kenney, C.J.; Parker, S.I.; Aw, C.H.; Snoeys, W.J.; Wooley, B.; Plummer, J.D.; /Stanford U., Elect. Eng. Dept.

    2011-05-20

    A second-generation monolithic silicon radiation sensor has been built and characterized. This pixel detector has CMOS circuitry fabricated directly in the high-resistivity floatzone substrate. The bulk is fully depleted from bias applied to the backside diode. Within the array, PMOS pixel circuitry forms the first stage amplifiers. Full CMOS circuitry implementing further amplification as well as column and row logic is located in the periphery of the pixel array. This allows a sparse-field readout scheme where only pixels with signals above a certain threshold are readout. We describe the fabrication process, circuit design, system performance, and results of gamma-ray radiation tests.

  18. CMOS mm-wave system-on-chip for sensing and communication

    NASA Astrophysics Data System (ADS)

    Tang, Adrian

    2015-05-01

    CMOS technology offers relatively low performance at mm-wave frequencies compared with other III-V technologies and the high levels of process variation further exacerbate design margins. This paper discusses several CMOS system-on-chips (SoCs) developed by JPL through collaboration with UCLA that use a self-healing approach to optimize mm-wave transceiver performance, as well as calibrate operation at runtime. Several applications will be discussed for mm-wave spectroscopy, radar, and communication systems, with SoCs demonstrated at V, W and D band.

  19. Optimal design of phase change random access memory based on 130nm CMOS technology

    NASA Astrophysics Data System (ADS)

    Cai, Daolin; Chen, Houpeng; Wang, Qian; Hong, Xiao; Chen, Yifeng; Xu, Linhai; Li, Xi; Wang, Zhaomin; Zhang, Yiyun; Song, Zhitang

    An 8Mb phase change random access memory (PCRAM) has been developed by a 130nm 4-ML standard CMOS technology based on the Resistor-on-Via-stacked-Plug (RVP) storage cell structure. This phase change resistor is formed after CMOS logic fabrication. PCRAM can be embedded without changing any logic device and process. The memory cell selector is implemented by a standard 1.2V NMOS device. Aimed at the resistance distributions, lowering the operation current and improving the bit yield, some methods are used to optimize the design of the chip.

  20. Spoked-ring microcavities: enabling seamless integration of nanophotonics in unmodified advanced CMOS microelectronics chips

    NASA Astrophysics Data System (ADS)

    Wade, Mark T.; Shainline, Jeffrey M.; Orcutt, Jason S.; Ram, Rajeev J.; Stojanovic, Vladimir; Popovic, Milos A.

    2014-03-01

    We present the spoked-ring microcavity, a nanophotonic building block enabling energy-efficient, active photonics in unmodified, advanced CMOS microelectronics processes. The cavity is realized in the IBM 45nm SOI CMOS process - the same process used to make many commercially available microprocessors including the IBM Power7 and Sony Playstation 3 processors. In advanced SOI CMOS processes, no partial etch steps and no vertical junctions are available, which limits the types of optical cavities that can be used for active nanophotonics. To enable efficient active devices with no process modifications, we designed a novel spoked-ring microcavity which is fully compatible with the constraints of the process. As a modulator, the device leverages the sub-100nm lithography resolution of the process to create radially extending p-n junctions, providing high optical fill factor depletion-mode modulation and thereby eliminating the need for a vertical junction. The device is made entirely in the transistor active layer, low-loss crystalline silicon, which eliminates the need for a partial etch commonly used to create ridge cavities. In this work, we present the full optical and electrical design of the cavity including rigorous mode solver and FDTD simulations to design the Qlimiting electrical contacts and the coupling/excitation. We address the layout of active photonics within the mask set of a standard advanced CMOS process and show that high-performance photonic devices can be seamlessly monolithically integrated alongside electronics on the same chip. The present designs enable monolithically integrated optoelectronic transceivers on a single advanced CMOS chip, without requiring any process changes, enabling the penetration of photonics into the microprocessor.

  1. Recent developments on CMOS MAPS for the SuperB Silicon Vertex Tracker

    NASA Astrophysics Data System (ADS)

    Rizzo, G.; Comott, D.; Manghisoni, M.; Re, V.; Traversi, G.; Fabbri, L.; Gabrielli, A.; Giorgi, F.; Pellegrini, G.; Sbarra, C.; Semprini-Cesari, N.; Valentinetti, S.; Villa, M.; Zoccoli, A.; Berra, A.; Lietti, D.; Prest, M.; Bevan, A.; Wilson, F.; Beck, G.; Morris, J.; Gannaway, F.; Cenci, R.; Bombelli, L.; Citterio, M.; Coelli, S.; Fiorini, C.; Liberali, V.; Monti, M.; Nasri, B.; Neri, N.; Palombo, F.; Stabile, A.; Balestri, G.; Batignani, G.; Bernardelli, A.; Bettarini, S.; Bosi, F.; Casarosa, G.; Ceccanti, M.; Forti, F.; Giorgi, M. A.; Lusiani, A.; Mammini, P.; Morsani, F.; Oberhof, B.; Paoloni, E.; Perez, A.; Petragnani, G.; Profeti, A.; Soldani, A.; Walsh, J.; Chrzaszcz, M.; Gaioni, L.; Manazza, A.; Quartieri, E.; Ratti, L.; Zucca, S.; Alampi, G.; Cotto, G.; Gamba, D.; Zambito, S.; Dalla Betta, G.-F.; Fontana, G.; Pancheri, L.; Povoli, M.; Verzellesi, G.; Bomben, M.; Bosisio, L.; Cristaudo, P.; Lanceri, L.; Liberti, B.; Rashevskaya, I.; Stella, C.; Vitale, L.

    2013-08-01

    In the design of the Silicon Vertex Tracker for the high luminosity SuperB collider, very challenging requirements are set by physics and background conditions on its innermost Layer0: small radius (about 1.5 cm), resolution of 10 - 15 ?m in both coordinates, low material budget < 1 %X0, and the ability to withstand a background hit rate of several tens of MHz /cm2. Thanks to an intense R&D program the development of Deep NWell CMOS MAPS (with the ST Microelectronics 130 nm process) has reached a good level of maturity and allowed for the first time the implementation of thin CMOS sensors with similar functionalities as in hybrid pixels, such as pixel-level sparsification and fast time stamping. Further MAPS performance improvements are currently under investigation with two different approaches: the INMAPS CMOS process, featuring a quadruple well and a high resistivity substrate, and 3D CMOS MAPS, realized with vertical integration technology. In both cases specific features of the processes chosen can improve charge collection efficiency, with respect to a standard DNW MAPS design, and allow to implement a more complex in-pixel logic in order to develop a faster readout architecture. Prototypes of MAPS matrix, suitable for application in the SuperB Layer0, have been realized with the INMAPS 180 nm process and the 130 nm Chartered/Tezzaron 3D process and results of their characterization will be presented in this paper.

  2. Fabrication and characterization of a charge-biased CMOS-MEMS resonant gate field effect transistor

    NASA Astrophysics Data System (ADS)

    Chin, C. H.; Li, C. S.; Li, M. H.; Wang, Y. L.; Li, S. S.

    2014-09-01

    A high-frequency charge-biased CMOS-MEMS resonant gate field effect transistor (RGFET) composed of a metal-oxide composite resonant-gate structure and an FET transducer has been demonstrated utilizing the TSMC 0.35??m CMOS technology with Q > 1700 and a signal-to-feedthrough ratio greater than 35?dB under a direct two-port measurement configuration. As compared to the conventional capacitive-type MEMS resonators, the proposed CMOS-MEMS RGFET features an inherent transconductance gain (gm) offered by the FET transduction capable of enhancing the motional signal of the resonator and relaxing the impedance mismatch issue to its succeeding electronics or 50 ?-based test facilities. In this work, we design a clamped-clamped beam resonant-gate structure right above a floating gate FET transducer as a high-Q building block through a maskless post-CMOS process to combine merits from the large capacitive transduction areas of the large-width beam resonator and the high gain of the underneath FET. An analytical model is also provided to simulate the behavior of the charge-biased RGFET; the theoretical prediction is in good agreement with the experimental results. Thanks to the deep-submicrometer gap spacing enabled by the post-CMOS polysilicon release process, the proposed resonator under a purely capacitive transduction already attains motional impedance less than 10?k?, a record-low value among CMOS-MEMS capacitive resonators. To go one step further, the motional signal of the proposed RGFET is greatly enhanced through the FET transduction. Such a strong transmission and a sharp phase transition across 0 pave a way for future RGFET-type oscillators in RF and sensor applications. A time-elapsed characterization of the charge leakage rate for the floating gate is also carried out.

  3. Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors

    PubMed Central

    Hsieh, Chen-Hsuan; Dai, Ching-Liang; Yang, Ming-Zhi

    2013-01-01

    This study investigates the design and fabrication of magnetic microsensors using the commercial 0.35 ?m complementary metal oxide semiconductor (CMOS) process. The magnetic sensor is composed of springs and interdigitated electrodes, and it is actuated by the Lorentz force. The finite element method (FEM) software CoventorWare is adopted to simulate the displacement and capacitance of the magnetic sensor. A post-CMOS process is utilized to release the suspended structure. The post-process uses an anisotropic dry etching to etch the silicon dioxide layer and an isotropic dry etching to remove the silicon substrate. When a magnetic field is applied to the magnetic sensor, it generates a change in capacitance. A sensing circuit is employed to convert the capacitance variation of the sensor into the output voltage. The experimental results show that the output voltage of the magnetic microsensor varies from 0.05 to 1.94 V in the magnetic field range of 5200 mT. PMID:24172287

  4. Fabrication and characterization of CMOS-MEMS magnetic microsensors.

    PubMed

    Hsieh, Chen-Hsuan; Dai, Ching-Liang; Yang, Ming-Zhi

    2013-01-01

    This study investigates the design and fabrication of magnetic microsensors using the commercial 0.35 ?m complementary metal oxide semiconductor (CMOS) process. The magnetic sensor is composed of springs and interdigitated electrodes, and it is actuated by the Lorentz force. The finite element method (FEM) software CoventorWare is adopted to simulate the displacement and capacitance of the magnetic sensor. A post-CMOS process is utilized to release the suspended structure. The post-process uses an anisotropic dry etching to etch the silicon dioxide layer and an isotropic dry etching to remove the silicon substrate. When a magnetic field is applied to the magnetic sensor, it generates a change in capacitance. A sensing circuit is employed to convert the capacitance variation of the sensor into the output voltage. The experimental results show that the output voltage of the magnetic microsensor varies from 0.05 to 1.94 V in the magnetic field range of 5-200 mT. PMID:24172287

  5. Low power SEU immune CMOS memory circuits

    NASA Technical Reports Server (NTRS)

    Liu, M. N.; Whitaker, Sterling

    1992-01-01

    The authors report a design improvement for CMOS static memory circuits hardened against single event upset (SEU) using a recently proposed logic/circuit design technique. This improvement drastically reduces static power consumption, reduces the number of transistors required in a D flip-flop design, and eliminates the possibility of capturing an upset state in the slave section during a clock transition.

  6. Radiation tolerance of 65 nm CMOS transistors

    NASA Astrophysics Data System (ADS)

    Krohn, M.; Bentele, B.; Christian, D. C.; Cumalat, J. P.; Deptuch, G.; Fahim, F.; Hoff, J.; Shenai, A.; Wagner, S. R.

    2015-12-01

    We report on the effects of ionizing radiation on 65 nm CMOS transistors held at approximately ?20 C during irradiation. The pattern of damage observed after a total dose of 1 Grad is similar to damage reported in room temperature exposures, but we observe less damage than was observed at room temperature.

  7. Radiation Tolerance of 65nm CMOS Transistors

    DOE PAGESBeta

    Krohn, M.; Bentele, B.; Christian, D. C.; Cumalat, J. P.; Deptuch, G.; Fahim, F.; Hoff, J.; Shenai, A.; Wagner, S. R.

    2015-12-11

    We report on the effects of ionizing radiation on 65 nm CMOS transistors held at approximately -20°C during irradiation. The pattern of damage observed after a total dose of 1 Grad is similar to damage reported in room temperature exposures, but we observe less damage than was observed at room temperature.

  8. CMOS preamplifiers for detectors large and small

    SciTech Connect

    O`Connor, P.

    1997-12-31

    We describe four CMOS preamplifiers developed for multiwire proportional chambers (MWPC) and silicon drift detectors (SDD) covering a capacitance range from 150 pF to 0.15 pF. Circuit techniques to optimize noise performance, particularly in the low-capacitance regime, are discussed.

  9. Low energy CMOS for space applications

    NASA Technical Reports Server (NTRS)

    Panwar, Ramesh; Alkalaj, Leon

    1992-01-01

    The current focus of NASA's space flight programs reflects a new thrust towards smaller, less costly, and more frequent space missions, when compared to missions such as Galileo, Magellan, or Cassini. Recently, the concept of a microspacecraft was proposed. In this concept, a small, compact spacecraft that weighs tens of kilograms performs focused scientific objectives such as imaging. Similarly, a Mars Lander micro-rover project is under study that will allow miniature robots weighing less than seven kilograms to explore the Martian surface. To bring the microspacecraft and microrover ideas to fruition, one will have to leverage compact 3D multi-chip module-based multiprocessors (MCM) technologies. Low energy CMOS will become increasingly important because of the thermodynamic considerations in cooling compact 3D MCM implementations and also from considerations of the power budget for space applications. In this paper, we show how the operating voltage is related to the threshold voltage of the CMOS transistors for accomplishing a task in VLSI with minimal energy. We also derive expressions for the noise margins at the optimal operating point. We then look at a low voltage CMOS (LVCMOS) technology developed at Stanford University which improves the power consumption over conventional CMOS by a couple of orders of magnitude and consider the suitability of the technology for space applications by characterizing its SEU immunity.

  10. Radiation Tolerance of 65nm CMOS Transistors

    SciTech Connect

    Krohn, M.; Bentele, B.; Christian, D. C.; Cumalat, J. P.; Deptuch, G.; Fahim, F.; Hoff, J.; Shenai, A.; Wagner, S. R.

    2015-12-11

    We report on the effects of ionizing radiation on 65 nm CMOS transistors held at approximately -20C during irradiation. The pattern of damage observed after a total dose of 1 Grad is similar to damage reported in room temperature exposures, but we observe less damage than was observed at room temperature.

  11. Swap intensified WDR CMOS module for I2/LWIR fusion

    NASA Astrophysics Data System (ADS)

    Ni, Yang; Noguier, Vincent

    2015-05-01

    The combination of high resolution visible-near-infrared low light sensor and moderate resolution uncooled thermal sensor provides an efficient way for multi-task night vision. Tremendous progress has been made on uncooled thermal sensors (a-Si, VOx, etc.). It's possible to make a miniature uncooled thermal camera module in a tiny 1cm3 cube with <1W power consumption. For silicon based solid-state low light CCD/CMOS sensors have observed also a constant progress in terms of readout noise, dark current, resolution and frame rate. In contrast to thermal sensing which is intrinsic day&night operational, the silicon based solid-state sensors are not yet capable to do the night vision performance required by defense and critical surveillance applications. Readout noise, dark current are 2 major obstacles. The low dynamic range at high sensitivity mode of silicon sensors is also an important limiting factor, which leads to recognition failure due to local or global saturations & blooming. In this context, the image intensifier based solution is still attractive for the following reasons: 1) high gain and ultra-low dark current; 2) wide dynamic range and 3) ultra-low power consumption. With high electron gain and ultra low dark current of image intensifier, the only requirement on the silicon image pickup device are resolution, dynamic range and power consumption. In this paper, we present a SWAP intensified Wide Dynamic Range CMOS module for night vision applications, especially for I2/LWIR fusion. This module is based on a dedicated CMOS image sensor using solar-cell mode photodiode logarithmic pixel design which covers a huge dynamic range (> 140dB) without saturation and blooming. The ultra-wide dynamic range image from this new generation logarithmic sensor can be used directly without any image processing and provide an instant light accommodation. The complete module is slightly bigger than a simple ANVIS format I2 tube with <500mW power consumption.

  12. 3D integration of sub-surface photonics with CMOS

    NASA Astrophysics Data System (ADS)

    Jalali, Bahram; Indukuri, Tejaswi; Koonath, Prakash

    2006-02-01

    The integration of photonics and electronics on a single silicon substrate requires technologies that can add optical functionalities without significantly sacrificing valuable wafer area. To this end, we have developed an innovative fabrication process, called SIMOX 3-D Sculpting, that enables monolithic optoelectronic integration in a manner that does not compromise the economics of CMOS manufacturing. In this technique, photonic devices are realized in subsurface silicon layers that are separated from the surface silicon layer by an intervening SiO II layer. The surface silicon layer may then be utilized for electronic circuitry. SIMOX 3-D sculpting involves (1) the implantation of oxygen ions into a patterned silicon substrate followed by (2) high temperature anneal to create buried waveguide-based photonic devices. This process has produced subterranean microresonators with unloaded quality factors of 8000 and extinction ratios >20dB. On the surface silicon layers, MOS transistor structures have been fabricated. The small cross-sectional area of the waveguides lends itself to the realization of nonlinear optical devices. We have previously demonstrated spectral broadening and continuum generation in silicon waveguides utilizing Kerr optical nonlinearity. This may be combined with microresonator filters for on-chip supercontiuum generation and spectral carving. The monolithic integration of CMOS circuits and optical modulators with such multi-wavelength sources represent an exciting avenue for silicon photonics.

  13. Radiation hardening of CMOS-based circuitry in SMART transmitters

    SciTech Connect

    Loescher, D.H. )

    1993-02-01

    Process control transmitters that incorporate digital signal processing could be used advantageously in nuclear power plants; however, because such transmitters are too sensitive to radiation, they are not used. The Electric Power Research Institute sponsored work at Sandia National Laboratories under EPRI contract RP2614-58 to determine why SMART transmitters fail when exposed to radiation and to design and demonstrate SMART transmitter circuits that could tolerate radiation. The term SMART'' denotes transmitters that contain digital logic. Tests showed that transmitter failure was caused by failure of the complementary metal oxide semiconductors (CMOS)-integrated circuits which are used extensively in commercial transmitters. Radiation-hardened replacements were not available for the radiation-sensitive CMOS circuits. A conceptual design showed that a radiation-tolerant transmitter could be constructed. A prototype for an analog-to-digital converter subsection worked satisfactorily after a total dose of 30 megarads(Si). Encouraging results were obtained from preliminary bench-top tests on a dc-to-dc converter for the power supply subsection.

  14. IR CMOS: near infrared enhanced digital imaging (Presentation Recording)

    NASA Astrophysics Data System (ADS)

    Pralle, Martin U.; Carey, James E.; Joy, Thomas; Vineis, Chris J.; Palsule, Chintamani

    2015-08-01

    SiOnyx has demonstrated imaging at light levels below 1 mLux (moonless starlight) at video frame rates with a 720P CMOS image sensor in a compact, low latency camera. Low light imaging is enabled by the combination of enhanced quantum efficiency in the near infrared together with state of the art low noise image sensor design. The quantum efficiency enhancements are achieved by applying Black Silicon, SiOnyx's proprietary ultrafast laser semiconductor processing technology. In the near infrared, silicon's native indirect bandgap results in low absorption coefficients and long absorption lengths. The Black Silicon nanostructured layer fundamentally disrupts this paradigm by enhancing the absorption of light within a thin pixel layer making 5 microns of silicon equivalent to over 300 microns of standard silicon. This results in a demonstrate 10 fold improvements in near infrared sensitivity over incumbent imaging technology while maintaining complete compatibility with standard CMOS image sensor process flows. Applications include surveillance, nightvision, and 1064nm laser see spot. Imaging performance metrics will be discussed. Demonstrated performance characteristics: Pixel size : 5.6 and 10 um Array size: 720P/1.3Mpix Frame rate: 60 Hz Read noise: 2 ele/pixel Spectral sensitivity: 400 to 1200 nm (with 10x QE at 1064nm) Daytime imaging: color (Bayer pattern) Nighttime imaging: moonless starlight conditions 1064nm laser imaging: daytime imaging out to 2Km

  15. A CMOS active pixel sensor for retinal stimulation

    NASA Astrophysics Data System (ADS)

    Prydderch, Mark L.; French, Marcus J.; Mathieson, Keith; Adams, Christopher; Gunning, Deborah; Laudanski, Jonathan; Morrison, James D.; Moodie, Alan R.; Sinclair, James

    2006-02-01

    Degenerative photoreceptor diseases, such as age-related macular degeneration and retinitis pigmentosa, are the most common causes of blindness in the western world. A potential cure is to use a microelectronic retinal prosthesis to provide electrical stimulation to the remaining healthy retinal cells. We describe a prototype CMOS Active Pixel Sensor capable of detecting a visual scene and translating it into a train of electrical pulses for stimulation of the retina. The sensor consists of a 10 x 10 array of 100 micron square pixels fabricated on a 0.35 micron CMOS process. Light incident upon each pixel is converted into output current pulse trains with a frequency related to the light intensity. These outputs are connected to a biocompatible microelectrode array for contact to the retinal cells. The flexible design allows experimentation with signal amplitudes and frequencies in order to determine the most appropriate stimulus for the retina. Neural processing in the retina can be studied by using the sensor in conjunction with a Field Programmable Gate Array (FPGA) programmed to behave as a neural network. The sensor has been integrated into a test system designed for studying retinal response. We present the most recent results obtained from this sensor.

  16. Fabrication and Characterization of a CMOS-MEMS Humidity Sensor.

    PubMed

    Dennis, John-Ojur; Ahmed, Abdelaziz-Yousif; Khir, Mohd-Haris

    2015-01-01

    This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of humidity on the active material layer of titanium dioxide (TiO2) nanoparticles deposited on the moving plate, which results in changes in the mass of the device. The sensor has been designed and fabricated through a standard 0.35 µm CMOS process technology and post-CMOS micromachining technique has been successfully implemented to release the MEMS structures. The sensor is operated in the dynamic mode using electrothermal actuation and the output signal measured using a piezoresistive (PZR) sensor connected in a Wheatstone bridge circuit. The output voltage of the humidity sensor increases from 0.585 mV to 30.580 mV as the humidity increases from 35% RH to 95% RH. The output voltage is found to be linear from 0.585 mV to 3.250 mV as the humidity increased from 35% RH to 60% RH, with sensitivity of 0.107 mV/% RH; and again linear from 3.250 mV to 30.580 mV as the humidity level increases from 60% RH to 95% RH, with higher sensitivity of 0.781 mV/% RH. On the other hand, the sensitivity of the humidity sensor increases linearly from 0.102 mV/% RH to 0.501 mV/% RH with increase in the temperature from 40 °C to 80 °C and a maximum hysteresis of 0.87% RH is found at a relative humidity of 80%. The sensitivity is also frequency dependent, increasing from 0.500 mV/% RH at 2 Hz to reach a maximum value of 1.634 mV/% RH at a frequency of 12 Hz, then decreasing to 1.110 mV/% RH at a frequency of 20 Hz. Finally, the CMOS-MEMS humidity sensor showed comparable response, recovery, and repeatability of measurements in three cycles as compared to a standard sensor that directly measures humidity in % RH. PMID:26184204

  17. Fabrication and Characterization of a CMOS-MEMS Humidity Sensor

    PubMed Central

    Dennis, John-Ojur; Ahmed, Abdelaziz-Yousif; Khir, Mohd-Haris

    2015-01-01

    This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of humidity on the active material layer of titanium dioxide (TiO2) nanoparticles deposited on the moving plate, which results in changes in the mass of the device. The sensor has been designed and fabricated through a standard 0.35 µm CMOS process technology and post-CMOS micromachining technique has been successfully implemented to release the MEMS structures. The sensor is operated in the dynamic mode using electrothermal actuation and the output signal measured using a piezoresistive (PZR) sensor connected in a Wheatstone bridge circuit. The output voltage of the humidity sensor increases from 0.585 mV to 30.580 mV as the humidity increases from 35% RH to 95% RH. The output voltage is found to be linear from 0.585 mV to 3.250 mV as the humidity increased from 35% RH to 60% RH, with sensitivity of 0.107 mV/% RH; and again linear from 3.250 mV to 30.580 mV as the humidity level increases from 60% RH to 95% RH, with higher sensitivity of 0.781 mV/% RH. On the other hand, the sensitivity of the humidity sensor increases linearly from 0.102 mV/% RH to 0.501 mV/% RH with increase in the temperature from 40 °C to 80 °C and a maximum hysteresis of 0.87% RH is found at a relative humidity of 80%. The sensitivity is also frequency dependent, increasing from 0.500 mV/% RH at 2 Hz to reach a maximum value of 1.634 mV/% RH at a frequency of 12 Hz, then decreasing to 1.110 mV/% RH at a frequency of 20 Hz. Finally, the CMOS-MEMS humidity sensor showed comparable response, recovery, and repeatability of measurements in three cycles as compared to a standard sensor that directly measures humidity in % RH. PMID:26184204

  18. Design and fabrication of a CMOS-compatible MHP gas sensor

    SciTech Connect

    Li, Ying; Yu, Jun Wu, Hao; Tang, Zhenan

    2014-03-15

    A novel micro-hotplate (MHP) gas sensor is designed and fabricated with a standard CMOS technology followed by post-CMOS processes. The tungsten plugging between the first and the second metal layer in the CMOS processes is designed as zigzag resistor heaters embedded in the membrane. In the post-CMOS processes, the membrane is released by front-side bulk silicon etching, and excellent adiabatic performance of the sensor is obtained. Pt/Ti electrode films are prepared on the MHP before the coating of the SnO{sub 2} film, which are promising to present better contact stability compared with Al electrodes. Measurements show that at room temperature in atmosphere, the device has a low power consumption of ?19 mW and a rapid thermal response of 8 ms for heating up to 300 C. The tungsten heater exhibits good high temperature stability with a slight fluctuation (<0.3%) in the resistance at an operation temperature of 300 C under constant heating mode for 336 h, and a satisfactory temperature coefficient of resistance of about 1.9/C.

  19. A 32 x 32 capacitive micromachined ultrasonic transducer array manufactured in standard CMOS.

    PubMed

    Lemmerhirt, David F; Cheng, Xiaoyang; White, Robert; Rich, Collin A; Zhang, Man; Fowlkes, J Brian; Kripfgans, Oliver D

    2012-07-01

    As ultrasound imagers become increasingly portable and lower cost, breakthroughs in transducer technology will be needed to provide high-resolution, real-time 3-D imaging while maintaining the affordability needed for portable systems. This paper presents a 32 x 32 ultrasound array prototype, manufactured using a CMUT-in-CMOS approach whereby ultrasonic transducer elements and readout circuits are integrated on a single chip using a standard integrated circuit manufacturing process in a commercial CMOS foundry. Only blanket wet-etch and sealing steps are added to complete the MEMS devices after the CMOS process. This process typically yields better than 99% working elements per array, with less than 1.5 dB variation in receive sensitivity among the 1024 individually addressable elements. The CMUT pulseecho frequency response is typically centered at 2.1 MHz with a -6 dB fractional bandwidth of 60%, and elements are arranged on a 250 ?m hexagonal grid (less than half-wavelength pitch). Multiplexers and CMOS buffers within the array are used to make on-chip routing manageable, reduce the number of physical output leads, and drive the transducer cable. The array has been interfaced to a commercial imager as well as a set of custom transmit and receive electronics, and volumetric images of nylon fishing line targets have been produced. PMID:22828847

  20. Depletion-mode carrier-plasma optical modulator in zero-change advanced CMOS.

    PubMed

    Shainline, Jeffrey M; Orcutt, Jason S; Wade, Mark T; Nammari, Kareem; Moss, Benjamin; Georgas, Michael; Sun, Chen; Ram, Rajeev J; Stojanovi?, Vladimir; Popovi?, Milo A

    2013-08-01

    We demonstrate the first (to the best of our knowledge) depletion-mode carrier-plasma optical modulator fabricated in a standard advanced complementary metal-oxide-semiconductor (CMOS) logic process (45 nm node SOI CMOS) with no process modifications. The zero-change CMOS photonics approach enables this device to be monolithically integrated into state-of-the-art microprocessors and advanced electronics. Because these processes support lateral p-n junctions but not efficient ridge waveguides, we accommodate these constraints with a new type of resonant modulator. It is based on a hybrid microring/disk cavity formed entirely in the sub-90 nm thick monocrystalline silicon transistor body layer. Electrical contact of both polarities is made along the inner radius of the multimode ring cavity via an array of silicon spokes. The spokes connect to p and n regions formed using transistor well implants, which form radially extending lateral junctions that provide index modulation. We show 5 Gbps data modulation at 1265 nm wavelength with 5.2 dB extinction ratio and an estimated 40 fJ/bit energy consumption. Broad thermal tuning is demonstrated across 3.2 THz (18 nm) with an efficiency of 291 GHz/mW. A single postprocessing step to remove the silicon handle wafer was necessary to support low-loss optical confinement in the device layer. This modulator is an important step toward monolithically integrated CMOS photonic interconnects. PMID:23903103

  1. Using diode-stacked NMOS as high voltage tolerant ESD protection device for analog applications in deep submicron CMOS technologies

    NASA Astrophysics Data System (ADS)

    Chen, Chung-Hui; Fang, Yean-Kuen; Wang, Wen-De; Tsai, Chien-Chun; Tu, Shen; Chen, Mark K. L.; Chang, Mi-Chang

    2003-05-01

    A new high voltage tolerant (HVT) electro-static discharge (ESD) design adopts one forward biased P+/N-well diode in series of one stacked NMOS, called the diode-stacked NMOS, is proposed to reduce the total capacitance and maintain the high ESD performance. The device has been implemented in 0.18 ?m CMOS logic technologies and finds the measured human body model and machine-model ESD levels of the HVT pin exceed 6 kV and 550 V, respectively, while the measured input capacitance is only 250 fF.

  2. Effect of body biasing on single-event induced charge collection in deep N-well technology

    NASA Astrophysics Data System (ADS)

    Ding, Yi; Hu, Jian-Guo; Qin, Jun-Rui; Tan, Hong-Zhou

    2015-07-01

    As the device size decreases, the soft error induced by space ions is becoming a great concern for the reliability of integrated circuits (ICs). At present, the body biasing technique is widely used in highly scaled technologies. In the paper, using the three-dimensional technology computer-aided design (TCAD) simulation, we analyze the effect of the body biasing on the single-event charge collection in deep N-well technology. Our simulation results show that the body biasing mainly affects the behavior of the source, and the effect of body biasing on the charge collection for the nMOSFET and pMOSFET is quite different. For the nMOSFET, the RBB will increase the charge collection, while the FBB will reduce the charge collection. For the pMOSFET, the effect of RBB on the SET pulse width is small, while the FBB has an adverse effect. Moreover, the differenceof the effect of body biasing on the charge collection is compared in deep N-well and twin well.

  3. A CMOS Imager with Focal Plane Compression using Predictive Coding

    NASA Technical Reports Server (NTRS)

    Leon-Salas, Walter D.; Balkir, Sina; Sayood, Khalid; Schemm, Nathan; Hoffman, Michael W.

    2007-01-01

    This paper presents a CMOS image sensor with focal-plane compression. The design has a column-level architecture and it is based on predictive coding techniques for image decorrelation. The prediction operations are performed in the analog domain to avoid quantization noise and to decrease the area complexity of the circuit, The prediction residuals are quantized and encoded by a joint quantizer/coder circuit. To save area resources, the joint quantizerlcoder circuit exploits common circuitry between a single-slope analog-to-digital converter (ADC) and a Golomb-Rice entropy coder. This combination of ADC and encoder allows the integration of the entropy coder at the column level. A prototype chip was fabricated in a 0.35 pm CMOS process. The output of the chip is a compressed bit stream. The test chip occupies a silicon area of 2.60 mm x 5.96 mm which includes an 80 X 44 APS array. Tests of the fabricated chip demonstrate the validity of the design.

  4. A CMOS Smart Temperature and Humidity Sensor with Combined Readout

    PubMed Central

    Eder, Clemens; Valente, Virgilio; Donaldson, Nick; Demosthenous, Andreas

    2014-01-01

    A fully-integrated complementary metal-oxide semiconductor (CMOS) sensor for combined temperature and humidity measurements is presented. The main purpose of the device is to monitor the hermeticity of micro-packages for implanted integrated circuits and to ensure their safe operation by monitoring the operating temperature and humidity on-chip. The smart sensor has two modes of operation, in which either the temperature or humidity is converted into a digital code representing a frequency ratio between two oscillators. This ratio is determined by the ratios of the timing capacitances and bias currents in both oscillators. The reference oscillator is biased by a current whose temperature dependency is complementary to the proportional to absolute temperature (PTAT) current. For the temperature measurement, this results in an exceptional normalized sensitivity of about 0.77%/°C at the accepted expense of reduced linearity. The humidity sensor is a capacitor, whose value varies linearly with relative humidity (RH) with a normalized sensitivity of 0.055%/% RH. For comparison, two versions of the humidity sensor with an area of either 0.2 mm2 or 1.2 mm2 were fabricated in a commercial 0.18 μm CMOS process. The on-chip readout electronics operate from a 5 V power supply and consume a current of approximately 85 μA. PMID:25230305

  5. CMOS-compatible active thermopiles for noise-added theory

    NASA Astrophysics Data System (ADS)

    Shen, Chih-Hsiung; Hou, Kuan-Chou

    2004-05-01

    Recently a novel signal processing theory related with noise has grown and proven. Certain complex systems can improve performance with added optimal noise that classical theory cannot explain. Their behavior may be represented by a simplified scheme that combines both a deterministic and stochastic source. To that end, we are using noise in remote temperature sensing system to enhance their function without altering the system. A new investigation of noise added scheme has been realized by an embedded heater for CMOS compatible thermoelectric infrared sensor. The design and fabrication of thermopile sensors are realized by using 1.2μm CMOS IC technology combined with a subsequent anisotropic front-side etching. We firstly develop an active thermopile with a heater embedded which is easily and naturally driven by a noise generation circuit. The stochastic resonance theory can be realized as a reduction in threshold of temperature detection. We have shown the possibility of improving the performance of remote temperature sensing system in the presence of noise. The strategy depends on the application. Stochastic resonance can reduce threshold detection resolution and greatly improve the temperature detection limit with a low cost scheme without using higher resolution ADC.

  6. Single donor electronics and quantum functionalities with advanced CMOS technology

    NASA Astrophysics Data System (ADS)

    Jehl, Xavier; Niquet, Yann-Michel; Sanquer, Marc

    2016-03-01

    Recent progresses in quantum dots technology allow fundamental studies of single donors in various semiconductor nanostructures. For the prospect of applications figures of merits such as scalability, tunability, and operation at relatively large temperature are of prime importance. Beyond the case of actual dopant atoms in a host crystal, similar arguments hold for small enough quantum dots which behave as artificial atoms, for instance for single spin control and manipulation. In this context, this experimental review focuses on the silicon-on-insulator devices produced within microelectronics facilities with only very minor modifications to the current industrial CMOS process and tools. This is required for scalability and enabled by shallow trench or mesa isolation. It also paves the way for real integration with conventional circuits, as illustrated by a nanoscale device coupled to a CMOS circuit producing a radio-frequency drive on-chip. At the device level we emphasize the central role of electrostatics in etched silicon nanowire transistors, which allows to understand the characteristics in the full range from zero to room temperature.

  7. A CMOS smart temperature and humidity sensor with combined readout.

    PubMed

    Eder, Clemens; Valente, Virgilio; Donaldson, Nick; Demosthenous, Andreas

    2014-01-01

    A fully-integrated complementary metal-oxide semiconductor (CMOS) sensor for combined temperature and humidity measurements is presented. The main purpose of the device is to monitor the hermeticity of micro-packages for implanted integrated circuits and to ensure their safe operation by monitoring the operating temperature and humidity on-chip. The smart sensor has two modes of operation, in which either the temperature or humidity is converted into a digital code representing a frequency ratio between two oscillators. This ratio is determined by the ratios of the timing capacitances and bias currents in both oscillators. The reference oscillator is biased by a current whose temperature dependency is complementary to the proportional to absolute temperature (PTAT) current. For the temperature measurement, this results in an exceptional normalized sensitivity of about 0.77%/°C at the accepted expense of reduced linearity. The humidity sensor is a capacitor, whose value varies linearly with relative humidity (RH) with a normalized sensitivity of 0.055%/% RH. For comparison, two versions of the humidity sensor with an area of either 0.2 mm2 or 1.2 mm2 were fabricated in a commercial 0.18 μm CMOS process. The on-chip readout electronics operate from a 5 V power supply and consume a current of approximately 85 µA. PMID:25230305

  8. Single donor electronics and quantum functionalities with advanced CMOS technology.

    PubMed

    Jehl, Xavier; Niquet, Yann-Michel; Sanquer, Marc

    2016-03-16

    Recent progresses in quantum dots technology allow fundamental studies of single donors in various semiconductor nanostructures. For the prospect of applications figures of merits such as scalability, tunability, and operation at relatively large temperature are of prime importance. Beyond the case of actual dopant atoms in a host crystal, similar arguments hold for small enough quantum dots which behave as artificial atoms, for instance for single spin control and manipulation. In this context, this experimental review focuses on the silicon-on-insulator devices produced within microelectronics facilities with only very minor modifications to the current industrial CMOS process and tools. This is required for scalability and enabled by shallow trench or mesa isolation. It also paves the way for real integration with conventional circuits, as illustrated by a nanoscale device coupled to a CMOS circuit producing a radio-frequency drive on-chip. At the device level we emphasize the central role of electrostatics in etched silicon nanowire transistors, which allows to understand the characteristics in the full range from zero to room temperature. PMID:26871255

  9. CMOS-TDI detector technology for reconnaissance application

    NASA Astrophysics Data System (ADS)

    Eckardt, Andreas; Reulke, Ralf; Jung, Melanie; Sengebusch, Karsten

    2014-10-01

    The Institute of Optical Sensor Systems (OS) at the Robotics and Mechatronics Center of the German Aerospace Center (DLR) has more than 30 years of experience with high-resolution imaging technology. This paper shows the institute's scientific results of the leading-edge detector design CMOS in a TDI (Time Delay and Integration) architecture. This project includes the technological design of future high or multi-spectral resolution spaceborne instruments and the possibility of higher integration. DLR OS and the Fraunhofer Institute for Microelectronic Circuits and Systems (IMS) in Duisburg were driving the technology of new detectors and the FPA design for future projects, new manufacturing accuracy and on-chip processing capability in order to keep pace with the ambitious scientific and user requirements. In combination with the engineering research, the current generation of space borne sensor systems is focusing on VIS/NIR high spectral resolution to meet the requirements on earth and planetary observation systems. The combination of large-swath and high-spectral resolution with intelligent synchronization control, fast-readout ADC (analog digital converter) chains and new focal-plane concepts opens the door to new remote-sensing and smart deep-space instruments. The paper gives an overview of the detector development status and verification program at DLR, as well as of new control possibilities for CMOS-TDI detectors in synchronization control mode.

  10. W-CMOS blanking device for projection multibeam lithography

    NASA Astrophysics Data System (ADS)

    Jurisch, Michael; Irmscher, Mathias; Letzkus, Florian; Eder-Kapl, Stefan; Klein, Christof; Loeschner, Hans; Piller, Walter; Platzgummer, Elmar

    2010-05-01

    As the designs of future mask nodes become more and more complex the corresponding pattern writing times will rise significantly when using single beam writing tools. Projection multi-beam lithography [1] is one promising technology to enhance the throughput compared to state of the art VSB pattern generators. One key component of the projection multi-beam tool is an Aperture Plate System (APS) to form and switch thousands of individual beamlets. In our present setup a highly parallel beam is divided into 43,008 individual beamlets by a Siaperture- plate. These micrometer sized beams pass through larger openings in a blanking-plate and are individually switched on and off by applying a voltage to blanking-electrodes which are placed around the blanking-plate openings. A charged particle 200x reduction optics demagnifies the beamlet array to the substrate. The switched off beams are filtered out in the projection optics so that only the beams which are unaffected by the blanking-plate are projected to the substrate with 200x reduction. The blanking-plate is basically a CMOS device for handling the writing data. In our work the blanking-electrodes are fabricated using CMOS compatible add on processes like SiO2-etching or metal deposition and structuring. A new approach is the implementation of buried tungsten electrodes for beam blanking.

  11. High-stage analog accumulator for TDI CMOS image sensors

    NASA Astrophysics Data System (ADS)

    Jianxin, Li; Fujun, Huang; Yong, Zong; Jing, Gao

    2016-02-01

    The impact of the parasitic phenomenon on the performance of the analog accumulator in TDI CMOS image sensor is analyzed and resolved. A 128-stage optimized accumulator based on 0.18-μm one-poly four-metal 3.3 V CMOS technology is designed and simulated. A charge injection effect from the top plate sampling is employed to compensate the un-eliminated parasitics based on the accumulator with a decoupling switch, and then a calibration circuit is designed to restrain the mismatch and Process, Voltage and Temperature (PVT) variations. The post layout simulation indicates that the improved SNR of the accumulator upgrades from 17.835 to 21.067 dB, while an ideal value is 21.072 dB. In addition, the linearity of the accumulator is 99.62%. The simulation results of two extreme cases and Monte Carlo show that the mismatch and PVT variations are restrained by the calibration circuit. Furthermore, it is promising to design a higher stage accumulator based on the proposed structure. Project supported by the National Natural Science Foundation of China (Nos. 61404090, 61434004).

  12. Cmos spdt switch for wlan applications

    NASA Astrophysics Data System (ADS)

    Bhuiyan, M. A. S.; Reaz, M. B. I.; Rahman, L. F.; Minhad, K. N.

    2015-04-01

    WLAN has become an essential part of our today's life. The advancement of CMOS technology let the researchers contribute low power, size and cost effective WLAN devices. This paper proposes a single pole double through transmit/receive (T/R) switch for WLAN applications in 0.13 μm CMOS technology. The proposed switch exhibit 1.36 dB insertion loss, 25.3 dB isolation and 24.3 dBm power handling capacity. Moreover, it only dissipates 786.7 nW power per cycle. The switch utilizes only transistor aspect ratio optimization and resistive body floating technique to achieve such desired performance. In this design the use of bulky inductor and capacitor is avoided to evade imposition of unwanted nonlinearities to the communication signal.

  13. Low-Power CMOS Digital Autocorrelator Spectrometer

    NASA Technical Reports Server (NTRS)

    Chandra, Kumar M.; Wilson, William J.

    1994-01-01

    Prototype digital autocorrelator spectrometer circuit designed and built as assembly of few very-large-scale integrated (VLSI) complementary metal oxide/semiconductor (CMOS) circuit chips. Spectrometer contains 128 frequency channels and operates at clock rate of as much as 40 MHz. Total dc power needed is only 6 W. Digital autocorrelator spectrometer consists of four 32-channel autocorrelator chips that collectively produce 128-point spectrum of input signal as computed by use of Fourier transform.

  14. Radiation effects on scientific CMOS image sensor

    NASA Astrophysics Data System (ADS)

    Yuanfu, Zhao; Liyan, Liu; Xiaohui, Liu; Xiaofeng, Jin; Xiang, Li

    2015-11-01

    A systemic solution for radiation hardened design is presented. Besides, a series of experiments have been carried out on the samples, and then the photoelectric response characteristic and spectral characteristic before and after the experiments have been comprehensively analyzed. The performance of the CMOS image sensor with the radiation hardened design technique realized total-dose resilience up to 300 krad(Si) and resilience to single-event latch up for LET up to 110 MeV·cm2/mg.

  15. CMOS Camera Array With Onboard Memory

    NASA Technical Reports Server (NTRS)

    Gat, Nahum

    2009-01-01

    A compact CMOS (complementary metal oxide semiconductor) camera system has been developed with high resolution (1.3 Megapixels), a USB (universal serial bus) 2.0 interface, and an onboard memory. Exposure times, and other operating parameters, are sent from a control PC via the USB port. Data from the camera can be received via the USB port and the interface allows for simple control and data capture through a laptop computer.

  16. Design and Fabrication of High-Efficiency CMOS/CCD Imagers

    NASA Technical Reports Server (NTRS)

    Pain, Bedabrata

    2007-01-01

    An architecture for back-illuminated complementary metal oxide/semiconductor (CMOS) and charge-coupled-device (CCD) ultraviolet/visible/near infrared- light image sensors, and a method of fabrication to implement the architecture, are undergoing development. The architecture and method are expected to enable realization of the full potential of back-illuminated CMOS/CCD imagers to perform with high efficiency, high sensitivity, excellent angular response, and in-pixel signal processing. The architecture and method are compatible with next-generation CMOS dielectric-forming and metallization techniques, and the process flow of the method is compatible with process flows typical of the manufacture of very-large-scale integrated (VLSI) circuits. The architecture and method overcome all obstacles that have hitherto prevented high-yield, low-cost fabrication of back-illuminated CMOS/CCD imagers by use of standard VLSI fabrication tools and techniques. It is not possible to discuss the obstacles in detail within the space available for this article. Briefly, the obstacles are posed by the problems of generating light-absorbing layers having desired uniform and accurate thicknesses, passivation of surfaces, forming structures for efficient collection of charge carriers, and wafer-scale thinning (in contradistinction to diescale thinning). A basic element of the present architecture and method - the element that, more than any other, makes it possible to overcome the obstacles - is the use of an alternative starting material: Instead of starting with a conventional bulk-CMOS wafer that consists of a p-doped epitaxial silicon layer grown on a heavily-p-doped silicon substrate, one starts with a special silicon-on-insulator (SOI) wafer that consists of a thermal oxide buried between a lightly p- or n-doped, thick silicon layer and a device silicon layer of appropriate thickness and doping. The thick silicon layer is used as a handle: that is, as a mechanical support for the device silicon layer during micro-fabrication.

  17. Behavior of faulty double BJT BiCMOS logic gates

    NASA Technical Reports Server (NTRS)

    Menon, Sankaran M.; Malaiya, Yashwant K.; Jayasumana, Anura P.

    1992-01-01

    Logic Behavior of a Double BJT BiCMOS device under transistor level shorts and opens is examined. In addition to delay faults, faults that cause the gate to exhibit sequential behavior were observed. Several faults can be detected only by monitoring the current. The faulty behavior of Bipolar (TTL) and CMOS logic families is compared with BiCMOS, to bring out the testability differences.

  18. Small-area and compact CMOS emulator circuit for CMOS/nanoscale memristor co-design

    PubMed Central

    2013-01-01

    In this paper, a CMOS emulator circuit that can reproduce nanoscale memristive behavior is proposed. The proposed emulator circuit can mimic the pinched hysteresis loops of nanoscale memristor memory's current-voltage relationship without using any resistor array, complicated circuit blocks, etc. that may occupy very large layout area. Instead of using a resistor array, other complicated circuit blocks, etc., the proposed emulator circuit can describe the nanoscale memristor's current-voltage relationship using a simple voltage-controlled resistor, where its resistance can be programmed by the stored voltage at the state variable capacitor. Comparing the layout area between the previous emulator circuit and the proposed one, the layout area of the proposed emulator circuit is estimated to be 32 times smaller than the previous emulator circuit. The proposed CMOS emulator circuit of nanoscale memristor memory will be very useful in developing hybrid circuits of CMOS/nanoscale memristor memory. PMID:24180626

  19. A CMOS frequency generation module for 60-GHz applications

    NASA Astrophysics Data System (ADS)

    Chunyuan, Zhou; Lei, Zhang; Hongrui, Wang; He, Qian

    2012-08-01

    A frequency generation module for 60-GHz transceivers and phased array systems is presented in this paper. It is composed of a divide-by-2 current mode logic divider (CML) and a doubler in push-push configuration. Benefiting from the CML structure and push-push configuration, the proposed frequency generation module has a wide operating frequency range to cover process, voltage, and temperature variation. It is implemented in a 90-nm CMOS process, and occupies a chip area of 0.64 × 0.65 mm2 including pads. The measurement results show that the designed frequency generation module functions properly with input frequency over 15 GHz to 25 GHz. The whole chip dissipates 12.1 mW from a 1.2-V supply excluding the output buffers.

  20. Application specific spectral response with CMOS compatible photodiodes

    SciTech Connect

    Simpson, M.L.; Ericson, M.N.; Jellison, G.E. Jr.; Dress, W.B.; Wintenberg, A.L.; Bobrek, M.

    1999-05-01

    Several methods are presented for realizing photodiodes with independent spectral responses in a standard CMOS integrated circuit process. Only the masks, materials, and fabrication steps inherent to this standard process were used. The spectral responses of the photodiodes were controlled by (1) using the SiO{sub 2} and polycrystalline Si as thin-film optical filters, (2) using photodiodes with different junction depths, and (3) controlling the density of the interfacial trapping centers by choosing which oxide forms the Si/SiO{sub 2} interface. Also presented is an example method for constructing photo-spectrometers using these spectrally-independent photodiodes. This method forms weighted sums of the photodiodes outputs to extract spectrographic information.

  1. A radiation hardened SONOS/CMOS EEPROM family

    NASA Astrophysics Data System (ADS)

    Klein, V. F.; Wood, G. M.; Buller, J. F.; Murray, J. R.; Rodriquez, J. L.

    1990-07-01

    There has long been a need for fast read nonvolatile, rad hard memories for military and space applications. Recent advances in Electrically Erasably Programmable Read Only Memory (EEPROM) technology now allow this need to be met for many applications. Harris/Sandia have developed a 16k and a 256k rad hard EEPROM. The EEPROMs utilize a Silicon Oxide Nitride Oxide Silicon (SONOS) memory transistor integrated into a 2 microns rad hard two level metal CMOS process. Both the 16k and the 256k parts were designed to interface with the Intel 8085 or 80C51 and National 32000 series microprocessors and feature page and block clear modes. Both parts are functionally identical, and are produced by the same fabrication process. They are also pin for pin compatible with each other, except for the extra address and ground pins on the 256k. The characteristics of this EEPROM family are described.

  2. A CMOS-MEMS arrayed resonant-gate field effect transistor (RGFET) oscillator

    NASA Astrophysics Data System (ADS)

    Chin, Chi-Hang; Li, Ming-Huang; Chen, Chao-Yu; Wang, Yu-Lin; Li, Sheng-Shian

    2015-11-01

    A high-frequency CMOS-MEMS arrayed resonant-gate field effect transistor (RGFET) fabricated by a standard 0.35 μm 2-poly-4-metal CMOS-MEMS platform is implemented to enable a Pierce-type oscillator. The proposed arrayed RGFET exhibits low motional impedance of only 5 kΩ under a purely capacitive transduction and decent power handling capability. With such features, the implemented oscillator shows impressive phase noise of  -117 dBc Hz-1 at the far-from-carrier offset (1 MHz). In this work, we design a clamped-clamped beam (CCB) arrayed resonator utilizing a high-velocity mechanical coupling scheme to serve as the resonant-gate array. To achieve a functional arrayed RGFET, a corresponding FET array is directly placed underneath the resonant gate array to convert the motional current on the resonant-gate array into a voltage output with a tunable transconductance gain. To understand the behavior of the proposed device, an equivalent circuit model consisting of the resonant unit and FET is also provided. To verify the effects of the post-CMOS process on device performance, a conventional MOS I D current measurement is carried out. Finally, a CMOS-MEMS arrayed RGFET oscillator is realized by utilizing a Pierce oscillator architecture, showing decent phase noise performance that benefits from the array design to alleviate the nonlinear effect of the resonant gate.

  3. Wide Range CMOS Voltage Detector with Low Current Consumption and Low Temperature Variation

    NASA Astrophysics Data System (ADS)

    Takakubo, Kawori; Takakubo, Hajime

    A wide range CMOS voltage detector with low current consumption consisting of CMOS inverters operating in both weak inversion and saturation region is proposed. A terminal of power supply for CMOS inverter can be expanded to a signal input terminal. A voltage-detection point and hysteresis characteristics of the proposed circuit can be designed by geometrical factor in MOSFET and an external bias voltage. The core circuit elements are fabricated in standard 0.18µm CMOS process and measured to confirm the operation. The detectable voltage is from 0.3V to 1.8V. The current consumption of voltage detection, standby current, is changed from 65pA for Vin =0.3V to 5.5µA for Vin =1.8V. The thermal characteristics from 250K to 400K are also considered. The measured temperature coefficient of the proposed voltage-detector core operating in weak inversion region is 4ppm/K and that in saturation region is 10ppm/K. The proposed voltage detector can be implemented with tiny chip area and is expected to an on-chip voltage detector of power supply for mobile application systems.

  4. Frontend Receiver Electronics for High Frequency Monolithic CMUT-on-CMOS Imaging Arrays

    PubMed Central

    Gurun, Gokce; Hasler, Paul; Degertekin, F. Levent

    2012-01-01

    This paper describes the design of CMOS receiver electronics for monolithic integration with capacitive micromachined ultrasonic transducer (CMUT) arrays for high-frequency intravascular ultrasound imaging. A custom 8-inch wafer is fabricated in a 0.35 ?m two-poly, four-metal CMOS process and then CMUT arrays are built on top of the application specific integrated circuits (ASICs) on the wafer. We discuss advantages of the single-chip CMUT-on-CMOS approach in terms of receive sensitivity and SNR. Low-noise and high-gain design of a transimpedance amplifier (TIA) optimized for a forward-looking volumetric-imaging CMUT array element is discussed as a challenging design example. Amplifier gain, bandwidth, dynamic range and power consumption trade-offs are discussed in detail. With minimized parasitics provided by the CMUT-on-CMOS approach, the optimized TIA design achieves a 90 fA/?Hz input referred current noise, which is less than the thermal-mechanical noise of the CMUT element. We show successful system operation with a pulse-echo measurement. Transducer noise-dominated detection in immersion is also demonstrated through output noise spectrum measurement of the integrated system at different CMUT bias voltages. A noise figure of 1.8 dB is obtained in the designed CMUT bandwidth of 10 MHz to 20 MHz. PMID:21859585

  5. Front-end receiver electronics for high-frequency monolithic CMUT-on-CMOS imaging arrays.

    PubMed

    Gurun, Gokce; Hasler, Paul; Degertekin, F

    2011-08-01

    This paper describes the design of CMOS receiver electronics for monolithic integration with capacitive micromachined ultrasonic transducer (CMUT) arrays for highfrequency intravascular ultrasound imaging. A custom 8-inch (20-cm) wafer is fabricated in a 0.35-?m two-poly, four-metal CMOS process and then CMUT arrays are built on top of the application specific integrated circuits (ASICs) on the wafer. We discuss advantages of the single-chip CMUT-on-CMOS approach in terms of receive sensitivity and SNR. Low-noise and high-gain design of a transimpedance amplifier (TIA) optimized for a forward-looking volumetric-imaging CMUT array element is discussed as a challenging design example. Amplifier gain, bandwidth, dynamic range, and power consumption trade-offs are discussed in detail. With minimized parasitics provided by the CMUT-on-CMOS approach, the optimized TIA design achieves a 90 fA/?Hz input-referred current noise, which is less than the thermal-mechanical noise of the CMUT element. We show successful system operation with a pulseecho measurement. Transducer-noise-dominated detection in immersion is also demonstrated through output noise spectrum measurement of the integrated system at different CMUT bias voltages. A noise figure of 1.8 dB is obtained in the designed CMUT bandwidth of 10 to 20 MHz. PMID:21859585

  6. Envelope tracking CMOS power amplifier with high-speed CMOS envelope amplifier for mobile handsets

    NASA Astrophysics Data System (ADS)

    Yoshida, Eiji; Sakai, Yasufumi; Oishi, Kazuaki; Yamazaki, Hiroshi; Mori, Toshihiko; Yamaura, Shinji; Suto, Kazuo; Tanaka, Tetsu

    2014-01-01

    A high-efficiency CMOS power amplifier (PA) based on envelope tracking (ET) has been reported for a wideband code division multiple access (W-CDMA) and long term evolution (LTE) application. By adopting a high-speed CMOS envelope amplifier with current direction sensing, a 5% improvement in total power-added efficiency (PAE) and a 11 dB decrease in adjacent channel leakage ratio (ACLR) are achieved with a W-CDMA signal. Moreover, the proposed PA achieves a PAE of 25.4% for a 10 MHz LTE signal at an output power (Pout) of 25.6 dBm and a gain of 24 dB.

  7. Electroabsorption modulators for CMOS compatible optical interconnects in III-V and group IV materials

    NASA Astrophysics Data System (ADS)

    Roth, Jonathan Edgar

    While electrical systems excel at information processing, photonics is useful in systems for high-bandwidth, low-loss signal transmission. As photonics technology has become increasingly widespread and has been deployed at shorter distance scales than traditional long-haul networks, it has become important to efficiently integrate photonics components with electrical integrated circuits. Optoelectronic modulators used as transmitters are an important class of device for use in optical interconnects. Many optoelectronic modulator designs use waveguides. Coupling light into waveguides requires a difficult alignment step. This dissertation will describe a number of optoelectronic modulators that do not have the tight alignment constraints associated with waveguide-based modulators. The eased alignment constraints may be important for the practical manufacturing and packaging of systems using optical interconnects. Most currently deployed photonics technologies also use substrates other than silicon and materials incompatible with CMOS manufacturing. Recently we discovered a strong quantum-confined Stark effect in Ge/SiGe quantum well structures that can be used to create efficient optoelectronic modulators on silicon substrates. Optoelectronic modulators using this technology can be fabricated with conventional CMOS foundry processes, possibly on the same chips as CMOS circuits. In this dissertation, an optical interconnect operating in the C-band will be presented. We believe this is the first such device employing an optical transmitter flip-chip bonded to silicon CMOS. A number of novel modulators will be presented, which are fabricated on silicon substrates, and employ Ge/SiGe quantum well structures. These modulators include a novel architecture known as the side-entry modulator, which is designed for monolithic integration with electronics. One side-entry modulator achieved over 3 dB of contrast in the telecommunications C-band for a voltage swing of 1V. Such a device is compatible with both the voltage swing of modern CMOS circuits, and long-distance telecommunications technologies including low-loss optical fiber and erbium-doped fiber amplifiers.

  8. Commercialisation of CMOS Integrated Circuit Technology in Multi-Electrode Arrays for Neuroscience and Cell-Based Biosensors

    PubMed Central

    Graham, Anthony H. D.; Robbins, Jon; Bowen, Chris R.; Taylor, John

    2011-01-01

    The adaptation of standard integrated circuit (IC) technology as a transducer in cell-based biosensors in drug discovery pharmacology, neural interface systems and electrophysiology requires electrodes that are electrochemically stable, biocompatible and affordable. Unfortunately, the ubiquitous Complementary Metal Oxide Semiconductor (CMOS) IC technology does not meet the first of these requirements. For devices intended only for research, modification of CMOS by post-processing using cleanroom facilities has been achieved. However, to enable adoption of CMOS as a basis for commercial biosensors, the economies of scale of CMOS fabrication must be maintained by using only low-cost post-processing techniques. This review highlights the methodologies employed in cell-based biosensor design where CMOS-based integrated circuits (ICs) form an integral part of the transducer system. Particular emphasis will be placed on the application of multi-electrode arrays for in vitro neuroscience applications. Identifying suitable IC packaging methods presents further significant challenges when considering specific applications. The various challenges and difficulties are reviewed and some potential solutions are presented. PMID:22163884

  9. A first single-photon avalanche diode fabricated in standard SOI CMOS technology with a full characterization of the device.

    PubMed

    Lee, Myung-Jae; Sun, Pengfei; Charbon, Edoardo

    2015-05-18

    This paper reports on the first implementation of a single-photon avalanche diode (SPAD) in standard silicon on insulator (SOI) complementary metal-oxide-semiconductor (CMOS) technology. The SPAD is realized in a circular shape, and it is based on a P(+)/N-well junction along with a P-well guard-ring structure formed by lateral diffusion of two closely spaced N-well regions. The SPAD electric-field profile is analyzed by means of simulation to predict the breakdown voltage and the effectiveness of premature edge breakdown. Measurements confirm these predictions and also provide a complete characterization of the device, including current-voltage characteristics, dark count rate (DCR), photon detection probability (PDP), afterpulsing probability, and photon timing jitter. The SOI CMOS SPAD has a PDP above 25% at 490-nm wavelength and, thanks to built-in optical sensitivity enhancement mechanisms, it is as high as 7.7% at 850-nm wavelength. The DCR is 244 Hz/?m2, and the afterpulsing probability is less than 0.1% for a dead time longer than 200 ns. The SPAD exhibits a timing response without exponential tail and provides a remarkable timing jitter of 65 ps (FWHM). The new device is well suited to operate in backside illumination within complex three-dimensional (3D) integrated circuits, thus contributing to a great improvement of fill factor and jitter uniformity in large arrays. PMID:26074572

  10. Design of a CMOS multi-mode GNSS receiver VCO

    NASA Astrophysics Data System (ADS)

    Qiang, Long; Yiqi, Zhuang; Yue, Yin; Zhenrong, Li

    2012-05-01

    A voltage-controlled oscillator (VCO) with dual stages of accumulation mode varactors for a multi-mode global navigation satellite system (GNSS) application, which adopts sigma-delta fractional-N technology in the synthesizer, is presented. The structure is selected to optimize the frequency coverage and tuning linearity, based on a general analysis of the parasitic capacitance in the coarse tuning switch bank cells, which cover the global positioning system (GPS) and Beidou (BD) bands. The VCO implemented in the 0.18 μm CMOS process can cover the GPS L1, BD B1, B2 and B3 bands with sufficient margin, and exhibits low phase noise by using this tuning curve linearization technique. The equalized Kvco characteristic behavior further offers a wide voltage tuning range and improves the stability of the closed loop.

  11. A new visible watermarking technique applied to CMOS image sensor

    NASA Astrophysics Data System (ADS)

    Yu, Pingping; Shang, Yan; Li, Chunming

    2013-10-01

    This paper presents a new visible watermarking solution for CMOS image sensor which can enhance secure features of captured images. Visible watermarks are embedded in the Bayer format image data and can be transferred by the subsequent interpolation process. A piecewise function is setup based on the gray scale resolution characteristics of human eyes. Watermark stretch factor can be adaptively chosen according to the gray value of the current pixel. The advantage of this algorithm is that the watermark has the same visibility in different image brightness region. A number of color images have been used to test the method. In order to check the robustness of watermarked images, we conducted adding noise and filtering experiments, results show that the visibility of watermark is also good after the experiments. The approach allows a digital watermark to be embedded in an image immediately upon its capture, before leaving the imaging chip.

  12. Wide dynamic range CMOS potentiostat for amperometric chemical sensor.

    PubMed

    Wang, Wei-Song; Kuo, Wei-Ting; Huang, Hong-Yi; Luo, Ching-Hsing

    2010-01-01

    Presented is a single-ended potentiostat topology with a new interface connection between sensor electrodes and potentiostat circuit to avoid deviation of cell voltage and linearly convert the cell current into voltage signal. Additionally, due to the increased harmonic distortion quantity when detecting low-level sensor current, the performance of potentiostat linearity which causes the detectable current and dynamic range to be limited is relatively decreased. Thus, to alleviate these irregularities, a fully-differential potentiostat is designed with a wide output voltage swing compared to single-ended potentiostat. Two proposed potentiostats were implemented using TSMC 0.18-?m CMOS process for biomedical application. Measurement results show that the fully differential potentiostat performs relatively better in terms of linearity when measuring current from 500 pA to 10 uA. Besides, the dynamic range value can reach a value of 86 dB. PMID:22294899

  13. Wide Dynamic Range CMOS Potentiostat for Amperometric Chemical Sensor

    PubMed Central

    Wang, Wei-Song; Kuo, Wei-Ting; Huang, Hong-Yi; Luo, Ching-Hsing

    2010-01-01

    Presented is a single-ended potentiostat topology with a new interface connection between sensor electrodes and potentiostat circuit to avoid deviation of cell voltage and linearly convert the cell current into voltage signal. Additionally, due to the increased harmonic distortion quantity when detecting low-level sensor current, the performance of potentiostat linearity which causes the detectable current and dynamic range to be limited is relatively decreased. Thus, to alleviate these irregularities, a fully-differential potentiostat is designed with a wide output voltage swing compared to single-ended potentiostat. Two proposed potentiostats were implemented using TSMC 0.18-?m CMOS process for biomedical application. Measurement results show that the fully differential potentiostat performs relatively better in terms of linearity when measuring current from 500 pA to 10 uA. Besides, the dynamic range value can reach a value of 86 dB. PMID:22294899

  14. Enabling Solutions for 28 nm CMOS Advanced Junction Formation

    NASA Astrophysics Data System (ADS)

    Li, C. I.; Kuo, P.; Lai, H. H.; Ma, K.; Liu, R.; Wu, H. H.; Chan, M.; Yang, C. L.; Wu, J. Y.; Guo, B. N.; Colombeau, B.; Thirumal, T.; Arevalo, E.; Toh, T.; Shim, K. H.; Sun, H. L.; Wu, T.; Lu, S.

    2011-01-01

    Controlling short channel effects for further scaled CMOS is required to take full advantage of the introduction of high K/metal gate or stress induced carrier mobility enhancement. Ultra-Shallow junction formation is necessary to minimize the short channel effects. In this paper, we will discuss the challenges for 28 nm Ultra-Shallow Junction formations in terms of figure of merits of Rs/Xj and junction leakage. We will demonstrate that by adopting and integrating Carborane (CBH, C2B10H12) molecular implant and Phosphorus along with co-implantation and PTC II (VSEA Process Temperature Control) technology, sub-32 nm pLDD and nLDD junction targets can be timely achieved using traditional anneals. Those damage engineering solutions can be readily implemented on state-of-the-art 28 nm device manufacturing.

  15. Radiation Hardening of CMOS Microelectronics

    NASA Astrophysics Data System (ADS)

    McCarthy, A.; Sigmon, T. W.

    2000-02-01

    A unique methodology, silicon transfer to arbitrary substrates, has been developed under this program and is being investigated as a technique for significantly increasing the radiation insensitivity of limited quantities of conventional silicon microelectronic circuits. In this approach, removal of the that part of the silicon substrate not required for circuit operation is carried out, following completion of the circuit fabrication process. This post-processing technique is therefore applicable to state-of-the-art ICs, effectively bypassing the 3-generation technology/performance gap presently separating today's electronics from available radiation-hard electronics. Also, of prime concern are the cost savings that result by eliminating the requirement for costly redesign of commercial circuits for Rad-hard applications. Successful deployment of this technology will result in a major impact on the radiation hard electronics community in circuit functionality, design and software availability and fabrication costs.

  16. Ultra low power CMOS technology

    NASA Technical Reports Server (NTRS)

    Burr, J.; Peterson, A.

    1991-01-01

    This paper discusses the motivation, opportunities, and problems associated with implementing digital logic at very low voltages, including the challenge of making use of the available real estate in 3D multichip modules, energy requirements of very large neural networks, energy optimization metrics and their impact on system design, modeling problems, circuit design constraints, possible fabrication process modifications to improve performance, and barriers to practical implementation.

  17. Novel CMOS electron imaging sensor

    NASA Astrophysics Data System (ADS)

    Finkelstein, Hod; Ginosar, Ran

    1998-09-01

    Electron detector arrays are employed in numerous imaging applications, from low-light-light-level imaging to astronomy, electron microscopy, and nuclear instrumentation. The majority of these detectors are fabricated with dedicated processes, use the semiconductor as a stopping and detecting layer, and utilize CCD-type charge transfer and detection. We present a new detector, wherein electrons are stopped by an exposed metal layer, and are subsequently detected either through charge collection in a CCD-type well, or by a measurement of a potential drop across a capacitor which is discharged by these electrons. Spatial localization is achieved by use of two metal planes, one for protecting the underlying gate structures, and another, with metal pixel structures, for 2D detection. The new device does not suffer from semiconductor non-uniformities, and blooming effects are minimized. It is effective for electrons with energies of 2-6 keV. The unique structure makes it possible to achieve a high fill factor, and to incorporate on-chip processing. An imaging chip implementing several test structures incorporating the new detector has been fabricated using a 2 micron double-poly double-metal process, and tested inside a JEOL 640 electron microscope.

  18. High responsivity CMOS imager pixel implemented in SOI technology

    NASA Technical Reports Server (NTRS)

    Zheng, X.; Wrigley, C.; Yang, G.; Pain, B.

    2000-01-01

    Availability of mature sub-micron CMOS technology and the advent of the new low noise active pixel sensor (APS) concept have enabled the development of low power, miniature, single-chip, CMOS digital imagers in the decade of the 1990's.

  19. Applications of the Integrated High-Performance CMOS Image Sensor to Range Finders from Optical Triangulation to the Automotive Field

    PubMed Central

    Wu, Jih-Huah; Pen, Cheng-Chung; Jiang, Joe-Air

    2008-01-01

    With their significant features, the applications of complementary metal-oxide semiconductor (CMOS) image sensors covers a very extensive range, from industrial automation to traffic applications such as aiming systems, blind guidance, active/passive range finders, etc. In this paper CMOS image sensor-based active and passive range finders are presented. The measurement scheme of the proposed active/passive range finders is based on a simple triangulation method. The designed range finders chiefly consist of a CMOS image sensor and some light sources such as lasers or LEDs. The implementation cost of our range finders is quite low. Image processing software to adjust the exposure time (ET) of the CMOS image sensor to enhance the performance of triangulation-based range finders was also developed. An extensive series of experiments were conducted to evaluate the performance of the designed range finders. From the experimental results, the distance measurement resolutions achieved by the active range finder and the passive range finder can be better than 0.6% and 0.25% within the measurement ranges of 1 to 8 m and 5 to 45 m, respectively. Feasibility tests on applications of the developed CMOS image sensor-based range finders to the automotive field were also conducted. The experimental results demonstrated that our range finders are well-suited for distance measurements in this field.

  20. Performance of a novel wafer scale CMOS active pixel sensor for bio-medical imaging.

    PubMed

    Esposito, M; Anaxagoras, T; Konstantinidis, A C; Zheng, Y; Speller, R D; Evans, P M; Allinson, N M; Wells, K

    2014-07-01

    Recently CMOS active pixels sensors (APSs) have become a valuable alternative to amorphous silicon and selenium flat panel imagers (FPIs) in bio-medical imaging applications. CMOS APSs can now be scaled up to the standard 20cm diameter wafer size by means of a reticle stitching block process. However, despite wafer scale CMOS APS being monolithic, sources of non-uniformity of response and regional variations can persist representing a significant challenge for wafer scale sensor response. Non-uniformity of stitched sensors can arise from a number of factors related to the manufacturing process, including variation of amplification, variation between readout components, wafer defects and process variations across the wafer due to manufacturing processes. This paper reports on an investigation into the spatial non-uniformity and regional variations of a wafer scale stitched CMOS APS. For the first time a per-pixel analysis of the electro-optical performance of a wafer CMOS APS is presented, to address inhomogeneity issues arising from the stitching techniques used to manufacture wafer scale sensors. A complete model of the signal generation in the pixel array has been provided and proved capable of accounting for noise and gain variations across the pixel array. This novel analysis leads to readout noise and conversion gain being evaluated at pixel level, stitching block level and in regions of interest, resulting in a coefficient of variation ?1.9%. The uniformity of the image quality performance has been further investigated in a typical x-ray application, i.e. mammography, showing a uniformity in terms of CNR among the highest when compared with mammography detectors commonly used in clinical practice. Finally, in order to compare the detection capability of this novel APS with the technology currently used (i.e. FPIs), theoretical evaluation of the detection quantum efficiency (DQE) at zero-frequency has been performed, resulting in a higher DQE for this detector compared to FPIs. Optical characterization, x-ray contrast measurements and theoretical DQE evaluation suggest that a trade off can be found between the need of a large imaging area and the requirement of a uniform imaging performance, making the DynAMITe large area CMOS APS suitable for a range of bio-medical applications. PMID:24909098

  1. Performance of a novel wafer scale CMOS active pixel sensor for bio-medical imaging

    NASA Astrophysics Data System (ADS)

    Esposito, M.; Anaxagoras, T.; Konstantinidis, A. C.; Zheng, Y.; Speller, R. D.; Evans, P. M.; Allinson, N. M.; Wells, K.

    2014-07-01

    Recently CMOS active pixels sensors (APSs) have become a valuable alternative to amorphous silicon and selenium flat panel imagers (FPIs) in bio-medical imaging applications. CMOS APSs can now be scaled up to the standard 20 cm diameter wafer size by means of a reticle stitching block process. However, despite wafer scale CMOS APS being monolithic, sources of non-uniformity of response and regional variations can persist representing a significant challenge for wafer scale sensor response. Non-uniformity of stitched sensors can arise from a number of factors related to the manufacturing process, including variation of amplification, variation between readout components, wafer defects and process variations across the wafer due to manufacturing processes. This paper reports on an investigation into the spatial non-uniformity and regional variations of a wafer scale stitched CMOS APS. For the first time a per-pixel analysis of the electro-optical performance of a wafer CMOS APS is presented, to address inhomogeneity issues arising from the stitching techniques used to manufacture wafer scale sensors. A complete model of the signal generation in the pixel array has been provided and proved capable of accounting for noise and gain variations across the pixel array. This novel analysis leads to readout noise and conversion gain being evaluated at pixel level, stitching block level and in regions of interest, resulting in a coefficient of variation ⩽1.9%. The uniformity of the image quality performance has been further investigated in a typical x-ray application, i.e. mammography, showing a uniformity in terms of CNR among the highest when compared with mammography detectors commonly used in clinical practice. Finally, in order to compare the detection capability of this novel APS with the technology currently used (i.e. FPIs), theoretical evaluation of the detection quantum efficiency (DQE) at zero-frequency has been performed, resulting in a higher DQE for this detector compared to FPIs. Optical characterization, x-ray contrast measurements and theoretical DQE evaluation suggest that a trade off can be found between the need of a large imaging area and the requirement of a uniform imaging performance, making the DynAMITe large area CMOS APS suitable for a range of bio-medical applications.

  2. Diurnal measurements with prototype CMOS Omega receivers

    NASA Technical Reports Server (NTRS)

    Burhans, R. W.

    1976-01-01

    Diurnal signals from eight omega channels have been monitored at 10.2 KHz for selected station pairs. All eight Omega stations have been received at least 50 percent of the time over a 24 hour period during the month of October 1976. The data presented confirm the expected performance of the CMOS omega sensor processor in being able to digsignals out of a noisy environment. Of particular interest are possibilities for use of antipodal reception phenomena and a need for some ways of correcting for multi-modal propagation effects.

  3. Vertical Isolation for Photodiodes in CMOS Imagers

    NASA Technical Reports Server (NTRS)

    Pain, Bedabrata

    2008-01-01

    In a proposed improvement in complementary metal oxide/semi conduct - or (CMOS) image detectors, two additional implants in each pixel would effect vertical isolation between the metal oxide/semiconductor field-effect transistors (MOSFETs) and the photodiode of the pixel. This improvement is expected to enable separate optimization of the designs of the photodiode and the MOSFETs so as to optimize their performances independently of each other. The purpose to be served by enabling this separate optimization is to eliminate or vastly reduce diffusion cross-talk, thereby increasing sensitivity, effective spatial resolution, and color fidelity while reducing noise.

  4. Monolithic CMOS imaging x-ray spectrometers

    NASA Astrophysics Data System (ADS)

    Kenter, Almus; Kraft, Ralph; Gauron, Thomas; Murray, Stephen S.

    2014-07-01

    The Smithsonian Astrophysical Observatory (SAO) in collaboration with SRI/Sarnoff is developing monolithic CMOS detectors optimized for x-ray astronomy. The goal of this multi-year program is to produce CMOS x-ray imaging spectrometers that are Fano noise limited over the 0.1-10keV energy band while incorporating the many benefits of CMOS technology. These benefits include: low power consumption, radiation "hardness", high levels of integration, and very high read rates. Small format test devices from a previous wafer fabrication run (2011-2012) have recently been back-thinned and tested for response below 1keV. These devices perform as expected in regards to dark current, read noise, spectral response and Quantum Efficiency (QE). We demonstrate that running these devices at rates ~> 1Mpix/second eliminates the need for cooling as shot noise from any dark current is greatly mitigated. The test devices were fabricated on 15μm, high resistivity custom (~30kΩ-cm) epitaxial silicon and have a 16 by 192 pixel format. They incorporate 16μm pitch, 6 Transistor Pinned Photo Diode (6TPPD) pixels which have ~40μV/electron sensitivity and a highly parallel analog CDS signal chain. Newer, improved, lower noise detectors have just been fabricated (October 2013). These new detectors are fabricated on 9μm epitaxial silicon and have a 1k by 1k format. They incorporate similar 16μm pitch, 6TPPD pixels but have ~ 50% higher sensitivity and much (3×) lower read noise. These new detectors have undergone preliminary testing for functionality in Front Illuminated (FI) form and are presently being prepared for back thinning and packaging. Monolithic CMOS devices such as these, would be ideal candidate detectors for the focal planes of Solar, planetary and other space-borne x-ray astronomy missions. The high through-put, low noise and excellent low energy response, provide high dynamic range and good time resolution; bright, time varying x-ray features could be temporally and spectrally resolved without saturation. We present details of our camera design and device performance with particular emphasis on those aspects of interest to single photon counting x-ray astronomy. These features include read noise, x-ray spectral response and quantum efficiency. Funding for this work has been provided in large part by NASA Grant NNX09AE86G and a grant from the Betty and Gordon Moore Foundation.

  5. Design of high speed camera based on CMOS technology

    NASA Astrophysics Data System (ADS)

    Park, Sei-Hun; An, Jun-Sick; Oh, Tae-Seok; Kim, Il-Hwan

    2007-12-01

    The capacity of a high speed camera in taking high speed images has been evaluated using CMOS image sensors. There are 2 types of image sensors, namely, CCD and CMOS sensors. CMOS sensor consumes less power than CCD sensor and can take images more rapidly. High speed camera with built-in CMOS sensor is widely used in vehicle crash tests and airbag controls, golf training aids, and in bullet direction measurement in the military. The High Speed Camera System made in this study has the following components: CMOS image sensor that can take about 500 frames per second at a resolution of 1280*1024; FPGA and DDR2 memory that control the image sensor and save images; Camera Link Module that transmits saved data to PC; and RS-422 communication function that enables control of the camera from a PC.

  6. Imaging performance comparison between CMOS and sCMOS detectors in a vibration test on large areas using digital holographic interferometry

    NASA Astrophysics Data System (ADS)

    Flores-Morenoa, J. M.; Torre I., Manuel H. De la; Aguayo, Daniel D.; Fernando Mendoza, S.

    2014-05-01

    A comparison of the interferometric imaging performance of two different cameras during a vibration study is presented. One of the cameras has a high speed CMOS sensor and the second one uses a high resolution (scientific) sCMOS sensor. This comparison is based on the interferometric response as a merit parameter of these sensors which is not a conventional procedure. Even when the current standard for image quality is on the signal to noise ratio calculations, an interferometric test to evaluate the fringe pattern visibility is equivalent to the contrast to noise ratio value. An out of plane digital holographic interferometer is used to test each camera once at the time with the same experimental conditions. The object under study is a metallically framed table with a Formica cover with an observable area of 1.1 m2. The sample is deformed by means of a controlled vibration induced by a tip ended linear step motor. Results from each camera are presented as the retrieved optical phase during the vibration. Finally, some conclusions based on the post processed images are presented suggesting a smoother optical phase obtained with the sCMOS camera.

  7. Design of a Tunable All-Digital UWB Pulse Generator CMOS Chip for Wireless Endoscope.

    PubMed

    Chul Kim; Nooshabadi, S

    2010-04-01

    A novel tunable all-digital, ultrawideband pulse generator (PG) has been implemented in a standard 0.18-¿ m complementary metal-oxide semiconductor (CMOS) process for implantable medical applications. The chip shows that an ultra-low dynamic energy consumption of 27 pJ per pulse without static current flow at a 200-MHz pulse repetition frequency (PRF) with a 1.8-V power supply and low area of 90 × 50 ¿m(2). The PG generates tunable pulsewidth, amplitude, and transmit (Tx) power by using simple circuitry, through precise timing control of the H-bridge output stage. The all-digital architecture allows easy integration into a standard CMOS process, thus making it the most suitable candidate for in-vivo biotelemetry applications. PMID:23853319

  8. IR CMOS: the digital nightvision solution to sub-1 mLux imaging

    NASA Astrophysics Data System (ADS)

    Pralle, M. U.; Carey, J. E.; Vineis, C.; Palsule, C.; Jiang, J.; Joy, T.

    2015-05-01

    SiOnyx has demonstrated imaging at light levels below 1 mLux at 60 FPS with a 720P CMOS image sensor in a compact, low latency camera. The camera contains a 1 inch (16 mm) optical format sensor and streams uncompressed video over CameraLink with row wise image latency below 1 msec. Sub mLux imaging is enabled by the combination of enhanced quantum efficiency in the near infrared together with state of the art low noise image sensor design. The quantum efficiency enhancement is achieved by utilizing SiOnyx's proprietary ultrafast laser semiconductor processing technology that enhances the absorption of light within a thin pixel layer. Our technology demonstrates a 10 fold improvement in infrared sensitivity over incumbent imaging technology while maintaining complete compatibility with standard CMOS image sensor process flows. Applications include surveillance, nightvision, and 1064nm laser see-spot.

  9. Radiation hardness of two CMOS prototypes for the ATLAS HL-LHC upgrade project.

    NASA Astrophysics Data System (ADS)

    Huffman, B. T.; Affolder, A.; Arndt, K.; Bates, R.; Benoit, M.; Di Bello, F.; Blue, A.; Bortoletto, D.; Buckland, M.; Buttar, C.; Caragiulo, P.; Das, D.; Dopke, J.; Dragone, A.; Ehrler, F.; Fadeyev, V.; Galloway, Z.; Grabas, H.; Gregor, I. M.; Grenier, P.; Grillo, A.; Hoeferkamp, M.; Hommels, L. B. A.; John, J.; Kanisauskas, K.; Kenney, C.; Kramberger, J.; Liang, Z.; Mandić, I.; Maneuski, D.; Martinez-Mckinney, F.; McMahon, S.; Meng, L.; Mikuž, M.; Muenstermann, D.; Nickerson, R.; Perić, I.; Phillips, P.; Plackett, R.; Rubbo, F.; Segal, J.; Seidel, S.; Seiden, A.; Shipsey, I.; Song, W.; Stanitzki, M.; Su, D.; Tamma, C.; Turchetta, R.; Vigani, L.; Volk, J.; Wang, R.; Warren, M.; Wilson, F.; Worm, S.; Xiu, Q.; Zhang, J.; Zhu, H.

    2016-02-01

    The LHC luminosity upgrade, known as the High Luminosity LHC (HL-LHC), will require the replacement of the existing silicon strip tracker and the transistion radiation tracker. Although a baseline design for this tracker exists the ATLAS collaboration and other non-ATLAS groups are exploring the feasibility of using CMOS Monolithic Active Pixel Sensors (MAPS) which would be arranged in a strip-like fashion and would take advantage of the service and support structure already being developed for the upgrade. Two test devices made with the AMS H35 process (a High voltage or HV CMOS process) have been subjected to various radiation environments and have performed well. The results of these tests are presented in this paper.

  10. A CMOS imager with negative feedback pixel circuits and its applications

    NASA Astrophysics Data System (ADS)

    Ikebe, Masayuki; Motohisa, Junichi

    2011-08-01

    We investigated a negative feedback method for adding functionality to a CMOS image sensor. Our sensor effectively uses the method to set any intermediate voltage into a photodiode capacitance while a pixel circuit is in motion. The negative feedback reset functions as a noise cancellation technique and can obtain intermediate image data during charge accumulation. As an above application, dynamic range compression is achieved by individually selecting pixels and by setting an intermediate voltage or performing quasi-holding with respect to each pixel. Additionally, we achieved duplicated interlaced processing and were able to output frame-difference images without frame buffers. The experimental results obtained with a chip fabricated using a 0.25-?m CMOS process demonstrate that dynamic range compression and intra-frame motion detection are effective applications of negative feedback resetting.

  11. Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS.

    PubMed

    Arcamone, J; van den Boogaart, M A F; Serra-Graells, F; Fraxedas, J; Brugger, J; Prez-Murano, F

    2008-07-30

    Wafer-scale nanostencil lithography (nSL) is used to define several types of silicon mechanical resonators, whose dimensions range from 20m down to 200nm, monolithically integrated with CMOS circuits. We demonstrate the simultaneous patterning by nSL of ?2000 nanodevices per wafer by post-processing standard CMOS substrates using one single metal evaporation, pattern transfer to silicon and subsequent etch of the sacrificial layer. Resonance frequencies in the MHz range were measured in air and vacuum. As proof-of-concept towards an application as high performance sensors, CMOS integrated nano/micromechanical resonators are successfully implemented as ultra-sensitive areal mass sensors. These devices demonstrate the ability to monitor the deposition of gold layers whose average thickness is smaller than a monolayer. Their areal mass sensitivity is in the range of 10(-11)gcm(-2)Hz(-1), and their thickness resolution corresponds to approximately a thousandth of a monolayer. PMID:21828759

  12. A CMOS Neural Interface for a Multichannel Vestibular Prosthesis.

    PubMed

    Hageman, Kristin N; Kalayjian, Zaven K; Tejada, Francisco; Chiang, Bryce; Rahman, Mehdi A; Fridman, Gene Y; Dai, Chenkai; Pouliquen, Philippe O; Georgiou, Julio; Della Santina, Charles C; Andreou, Andreas G

    2016-04-01

    We present a high-voltage CMOS neural-interface chip for a multichannel vestibular prosthesis (MVP) that measures head motion and modulates vestibular nerve activity to restore vision- and posture-stabilizing reflexes. This application specific integrated circuit neural interface (ASIC-NI) chip was designed to work with a commercially available microcontroller, which controls the ASIC-NI via a fast parallel interface to deliver biphasic stimulation pulses with 9-bit programmable current amplitude via 16 stimulation channels. The chip was fabricated in the ONSemi C5 0.5 micron, high-voltage CMOS process and can accommodate compliance voltages up to 12 V, stimulating vestibular nerve branches using biphasic current pulses up to 1.45±0.06 mA with durations as short as 10 μs/phase. The ASIC-NI includes a dedicated digital-to-analog converter for each channel, enabling it to perform complex multipolar stimulation. The ASIC-NI replaces discrete components that cover nearly half of the 2nd generation MVP (MVP2) printed circuit board, reducing the MVP system size by 48% and power consumption by 17%. Physiological tests of the ASIC-based MVP system (MVP2A) in a rhesus monkey produced reflexive eye movement responses to prosthetic stimulation similar to those observed when using the MVP2. Sinusoidal modulation of stimulus pulse rate from 68-130 pulses per second at frequencies from 0.1 to 5 Hz elicited appropriately-directed slow phase eye velocities ranging in amplitude from 1.9-16.7 (°)/s for the MVP2 and 2.0-14.2 (°)/s for the MVP2A. The eye velocities evoked by MVP2 and MVP2A showed no significant difference ( t-test, p=0.34), suggesting that the MVP2A achieves performance at least as good as the larger MVP2. PMID:25974945

  13. Packaging commercial CMOS chips for lab on a chip integration.

    PubMed

    Datta-Chaudhuri, Timir; Abshire, Pamela; Smela, Elisabeth

    2014-05-21

    Combining integrated circuitry with microfluidics enables lab-on-a-chip (LOC) devices to perform sensing, freeing them from benchtop equipment. However, this integration is challenging with small chips, as is briefly reviewed with reference to key metrics for package comparison. In this paper we present a simple packaging method for including mm-sized, foundry-fabricated dies containing complementary metal oxide semiconductor (CMOS) circuits within LOCs. The chip is embedded in an epoxy handle wafer to yield a level, large-area surface, allowing subsequent photolithographic post-processing and microfluidic integration. Electrical connection off-chip is provided by thin film metal traces passivated with parylene-C. The parylene is patterned to selectively expose the active sensing area of the chip, allowing direct interaction with a fluidic environment. The method accommodates any die size and automatically levels the die and handle wafer surfaces. Functionality was demonstrated by packaging two different types of CMOS sensor ICs, a bioamplifier chip with an array of surface electrodes connected to internal amplifiers for recording extracellular electrical signals and a capacitance sensor chip for monitoring cell adhesion and viability. Cells were cultured on the surface of both types of chips, and data were acquired using a PC. Long term culture (weeks) showed the packaging materials to be biocompatible. Package lifetime was demonstrated by exposure to fluids over a longer duration (months), and the package was robust enough to allow repeated sterilization and re-use. The ease of fabrication and good performance of this packaging method should allow wide adoption, thereby spurring advances in miniaturized sensing systems. PMID:24682025

  14. Far ultraviolet sensitivity of silicon CMOS sensors

    NASA Astrophysics Data System (ADS)

    Davis, Michael W.; Greathouse, Thomas K.; Retherford, Kurt D.; Winters, Gregory S.; Bai, Yibin; Beletic, James W.

    2012-07-01

    We describe vacuum ultraviolet sensitivity measurements of a new high performance silicon-based CMOS sensor from Teledyne Imaging Sensors. These sensors do not require the high voltages of MCP detectors, making them a lower mass and power alternative to the more mature MCP technology. These devices demonstrate up to 40 percent quantum efficiency at vacuum ultraviolet wavelengths, either meeting or greatly exceeding 10 percent quantum efficiency across the entire 100-200 nm wavelength region. As with similar visible sensitive devices, backside illumination results in a higher quantum efficiency than frontside illumination. Measurements of the vacuum ultraviolet sensitivity of the Teledyne silicon PIN detectors were made by directing a known intensity of ultraviolet light at discrete wavelengths onto the test detectors and reading out the resulting photocurrent. The sensitivity of the detector at a given wavelength was then calculated from the intensity and wavelength of the incoming light and the relative photodiode to NIST-traceable calibration diode active areas. A custom electromechanical interface was developed to make these measurements within the SwRI Vacuum Radiometric Calibration Chamber. While still in the single pixel stage, full 1K 1K focal plane arrays are possible using existing CMOS readout electronics and hold great promise for inclusion in future spaceflight instrument concepts.

  15. Ultrafast all-optical temporal differentiators based on CMOS-compatible integrated-waveguide Bragg gratings.

    PubMed

    Rutkowska, K A; Duchesne, D; Strain, M J; Morandotti, R; Sorel, M; Azaña, J

    2011-09-26

    We report the first realization of integrated, all-optical first- and higher-order photonic differentiators operating at terahertz (THz) processing speeds. This is accomplished in a Silicon-on-Insulator (SOI) CMOS-compatible platform using a simple integrated geometry based on (π-)phase-shifted Bragg gratings. Moreover, we achieve on-chip generation of sub-picosecond Hermite-Gaussian pulse waveforms, which are noteworthy for applications in next-generation optical telecommunications. PMID:21996892

  16. A low jitter all - digital phase - locked loop in 180 nm CMOS technology

    NASA Astrophysics Data System (ADS)

    Shumkin, O. V.; Butuzov, V. A.; Normanov, D. D.; Ivanov, P. Yu

    2016-02-01

    An all-digital phase locked loop (ADPLL) was implemented in 180 nm CMOS technology. The proposed ADPLL uses a digitally controlled oscillator to achieve 3 ps resolution. The pure digital phase locked loop is attractive because it is less sensitive to noise and operating conditions than its analog counterpart. The proposed ADPLL can be easily applied to different process as a soft IP block, making it very suitable for system-on-chip applications.

  17. A 1 GHz sample rate, 256-channel, 1-bit quantization, CMOS, digital correlator chip

    NASA Technical Reports Server (NTRS)

    Timoc, C.; Tran, T.; Wongso, J.

    1992-01-01

    This paper describes the development of a digital correlator chip with the following features: 1 Giga-sample/second; 256 channels; 1-bit quantization; 32-bit counters providing up to 4 seconds integration time at 1 GHz; and very low power dissipation per channel. The improvements in the performance-to-cost ratio of the digital correlator chip are achieved with a combination of systolic architecture, novel pipelined differential logic circuits, and standard 1.0 micron CMOS process.

  18. Monolithic silicon photonics in a sub-100nm SOI CMOS microprocessor foundry: progress from devices to systems

    NASA Astrophysics Data System (ADS)

    Popović, Miloš A.; Wade, Mark T.; Orcutt, Jason S.; Shainline, Jeffrey M.; Sun, Chen; Georgas, Michael; Moss, Benjamin; Kumar, Rajesh; Alloatti, Luca; Pavanello, Fabio; Chen, Yu-Hsin; Nammari, Kareem; Notaros, Jelena; Atabaki, Amir; Leu, Jonathan; Stojanović, Vladimir; Ram, Rajeev J.

    2015-02-01

    We review recent progress of an effort led by the Stojanović (UC Berkeley), Ram (MIT) and Popović (CU Boulder) research groups to enable the design of photonic devices, and complete on-chip electro-optic systems and interfaces, directly in standard microelectronics CMOS processes in a microprocessor foundry, with no in-foundry process modifications. This approach allows tight and large-scale monolithic integration of silicon photonics with state-of-the-art (sub-100nm-node) microelectronics, here a 45nm SOI CMOS process. It enables natural scale-up to manufacturing, and rapid advances in device design due to process repeatability. The initial driver application was addressing the processor-to-memory communication energy bottleneck. Device results include 5Gbps modulators based on an interleaved junction that take advantage of the high resolution of the sub-100nm CMOS process. We demonstrate operation at 5fJ/bit with 1.5dB insertion loss and 8dB extinction ratio. We also demonstrate the first infrared detectors in a zero-change CMOS process, using absorption in transistor source/drain SiGe stressors. Subsystems described include the first monolithically integrated electronic-photonic transmitter on chip (modulator+driver) with 20-70fJ/bit wall plug energy/bit (2-3.5Gbps), to our knowledge the lowest transmitter energy demonstrated to date. We also demonstrate native-process infrared receivers at 220fJ/bit (5Gbps). These are encouraging signs for the prospects of monolithic electronics-photonics integration. Beyond processor-to-memory interconnects, our approach to photonics as a "More-than- Moore" technology inside advanced CMOS promises to enable VLSI electronic-photonic chip platforms tailored to a vast array of emerging applications, from optical and acoustic sensing, high-speed signal processing, RF and optical metrology and clocks, through to analog computation and quantum technology.

  19. The intersection of CMOS microsystems and upconversion nanoparticles for luminescence bioimaging and bioassays.

    PubMed

    Wei, Liping; Doughan, Samer; Han, Yi; DaCosta, Matthew V; Krull, Ulrich J; Ho, Derek

    2014-01-01

    Organic fluorophores and quantum dots are ubiquitous as contrast agents for bio-imaging and as labels in bioassays to enable the detection of biological targets and processes. Upconversion nanoparticles (UCNPs) offer a different set of opportunities as labels in bioassays and for bioimaging. UCNPs are excited at near-infrared (NIR) wavelengths where biological molecules are optically transparent, and their luminesce in the visible and ultraviolet (UV) wavelength range is suitable for detection using complementary metal-oxide-semiconductor (CMOS) technology. These nanoparticles provide multiple sharp emission bands, long lifetimes, tunable emission, high photostability, and low cytotoxicity, which render them particularly useful for bio-imaging applications and multiplexed bioassays. This paper surveys several key concepts surrounding upconversion nanoparticles and the systems that detect and process the corresponding luminescence signals. The principle of photon upconversion, tuning of emission wavelengths, UCNP bioassays, and UCNP time-resolved techniques are described. Electronic readout systems for signal detection and processing suitable for UCNP luminescence using CMOS technology are discussed. This includes recent progress in miniaturized detectors, integrated spectral sensing, and high-precision time-domain circuits. Emphasis is placed on the physical attributes of UCNPs that map strongly to the technical features that CMOS devices excel in delivering, exploring the interoperability between the two technologies. PMID:25211198

  20. The Intersection of CMOS Microsystems and Upconversion Nanoparticles for Luminescence Bioimaging and Bioassays

    PubMed Central

    Wei, Liping.; Doughan, Samer.; Han, Yi.; DaCosta, Matthew V.; Krull, Ulrich J.; Ho, Derek.

    2014-01-01

    Organic fluorophores and quantum dots are ubiquitous as contrast agents for bio-imaging and as labels in bioassays to enable the detection of biological targets and processes. Upconversion nanoparticles (UCNPs) offer a different set of opportunities as labels in bioassays and for bioimaging. UCNPs are excited at near-infrared (NIR) wavelengths where biological molecules are optically transparent, and their luminesce in the visible and ultraviolet (UV) wavelength range is suitable for detection using complementary metal-oxide-semiconductor (CMOS) technology. These nanoparticles provide multiple sharp emission bands, long lifetimes, tunable emission, high photostability, and low cytotoxicity, which render them particularly useful for bio-imaging applications and multiplexed bioassays. This paper surveys several key concepts surrounding upconversion nanoparticles and the systems that detect and process the corresponding luminescence signals. The principle of photon upconversion, tuning of emission wavelengths, UCNP bioassays, and UCNP time-resolved techniques are described. Electronic readout systems for signal detection and processing suitable for UCNP luminescence using CMOS technology are discussed. This includes recent progress in miniaturized detectors, integrated spectral sensing, and high-precision time-domain circuits. Emphasis is placed on the physical attributes of UCNPs that map strongly to the technical features that CMOS devices excel in delivering, exploring the interoperability between the two technologies. PMID:25211198

  1. Lower-Dark-Current, Higher-Blue-Response CMOS Imagers

    NASA Technical Reports Server (NTRS)

    Pain, Bedabrata; Cunningham, Thomas; Hancock, Bruce

    2008-01-01

    Several improved designs for complementary metal oxide/semiconductor (CMOS) integrated-circuit image detectors have been developed, primarily to reduce dark currents (leakage currents) and secondarily to increase responses to blue light and increase signal-handling capacities, relative to those of prior CMOS imagers. The main conclusion that can be drawn from a study of the causes of dark currents in prior CMOS imagers is that dark currents could be reduced by relocating p/n junctions away from Si/SiO2 interfaces. In addition to reflecting this conclusion, the improved designs include several other features to counteract dark-current mechanisms and enhance performance.

  2. Noise behavior of a 180-nm CMOS SOI technology for detector front-end electronics

    SciTech Connect

    Re, Valerio; Gaioni, Luigi; Manghisoni, Massimo; Ratti, Lodovico; Speziali, Valeria; Traversi, Gianluca; Yarema, Ray; /Fermilab

    2008-01-01

    This paper is motivated by the growing interest of the detector and readout electronics community towards silicon-on-insulator CMOS processes. Advanced SOI MOSFETs feature peculiar electrical characteristics impacting their performance with respect to bulk CMOS devices. Here we mainly focus on the study of these effects on the noise parameters of the transistors, using experimental data relevant to 180 nm fully depleted SOI devices as a reference. The comparison in terms of white and 1/f noise components with bulk MOSFETs with the same minimum feature size gives a basis of estimate for the signal-to-noise ratio achievable in detector front-end integrated circuits designed in an SOI technology.

  3. A CMOS analog front-end chip for amperometric electrochemical sensors

    NASA Astrophysics Data System (ADS)

    Zhichao, Li; Yuntao, Liu; Min, Chen; Jingbo, Xiao; Jie, Chen

    2015-07-01

    This paper reports a complimentary metal-oxide-semiconductor (CMOS) analog front-end chip for amperometric electrochemical sensors. The chip includes a digital configuration circuit, which can communicate with an external microcontroller by employing an I2C interface bus, and thus is highly programmable. Digital correlative double samples technique and an incremental sigma-delta analog to digital converter (?-? ADC) are employed to achieve a new proposed system architecture with double samples. The chip has been fabricated in a standard 0.18-?m CMOS process with high-precision and high-linearity performance occupying an area of 1.3 1.9 mm2. Sample solutions with various phosphate concentrations have been detected with a step concentration of 0.01 mg/L. Project supported by the National Key Basic Research and Development Project (No. 2015CB352103).

  4. A new CMOS electro-optical modulator based on the charge pumping phenomenon

    NASA Astrophysics Data System (ADS)

    Massari, Nicola; Gottardi, Massimo

    2006-04-01

    In this paper, we report on a new type of CMOS electro-optical modulator (EOM), called Photonic Mixer Device (PMD), based on the Charge Pumping (CP) phenomenon, which is capable of mixing and accumulating photo-generated charge-packets synchronously with respect to a pulsed light source. The device uses two PMOS transistors with embedded photodiode to detect the intensity and phase of a modulated light signal. Using clocking between accumulation and inversion, the two transistors transfer to output charge packets which are synchronized and proportional to the light intensity. The device operates at 3.3V with no dc power consumption and is implemented in a standard 0.35?m CMOS process. Using a 1.5mW/cm2 light source pulsed at 25KHz, the device estimates a phase delay with an accuracy of 0.8%.

  5. 3D integration of planar crossbar memristive devices with CMOS substrate

    NASA Astrophysics Data System (ADS)

    Lin, Peng; Pi, Shuang; Xia, Qiangfei

    2014-10-01

    Planar memristive devices with bottom electrodes embedded into the substrates were integrated on top of CMOS substrates using nanoimprint lithography to implement hybrid circuits with a CMOL-like architecture. The planar geometry eliminated the mechanically and electrically weak parts, such as kinks in the top electrodes in a traditional crossbar structure, and allowed the use of thicker and thus less resistive metal wires as the bottom electrodes. Planar memristive devices integrated with CMOS have demonstrated much lower programing voltages and excellent switching uniformity. With the inclusion of the Moiré pattern, the integration process has sub-20 nm alignment accuracy, opening opportunities for 3D hybrid circuits in applications in the next generation of memory and unconventional computing.

  6. Noise performance design of CMOS preamplifier for the active semiconductor neural probe.

    PubMed

    Kim, K H; Kim, S J

    2000-08-01

    A systematic design guideline is presented for the noise performance of preamplifier for semiconductor neural probe which contains on-chip electronic circuitry. The overall signal-to-noise ratio (SNR) is calculated considering the spectral characteristics of the measured extracellular action potential and the low-frequency noise spectrum of the CMOS device from typical fabrication processes. An analytical expression of the output noise power is derived, and utilized to tailor the frequency response and device parameters which are controllable by the circuit designer. An analysis of the output SNR of a two-stage CMOS differential amplifier is given and the major factors which have significant effects on the SNR are determined. We showed that a little deviation of the input device sizes and transconductance ratio from the optimal values can significantly deteriorate the SNR. Quantitative information of the preamplifier circuit parameters for satisfactory noise performance is provided. PMID:10943059

  7. A low noise CMOS RF front-end for UWB 6-9 GHz applications

    NASA Astrophysics Data System (ADS)

    Feng, Zhou; Ting, Gao; Fei, Lan; Wei, Li; Ning, Li; Junyan, Ren

    2010-11-01

    An integrated fully differential ultra-wideband CMOS RF front-end for 6-9 GHz is presented. A resistive feedback low noise amplifier and a gain controllable IQ merged folded quadrature mixer are integrated as the RF front-end. The ESD protected chip is fabricated in a TSMC 0.13 ?m RF CMOS process and achieves a maximum voltage gain of 23-26 dB and a minimum voltage gain of 16-19 dB, an averaged total noise figure of 3.3-4.6 dB while operating in the high gain mode and an in-band IIP3 of -12.6 dBm while in the low gain mode. This RF front-end consumes 17 mA from a 1.2 V supply voltage.

  8. A Review of the CMOS Buried Double Junction (BDJ) Photodetector and its Applications

    PubMed Central

    Feruglio, Sylvain; Lu, Guo-Neng; Garda, Patrick; Vasilescu, Gabriel

    2008-01-01

    A CMOS Buried Double Junction PN (BDJ) photodetector consists of two vertically-stacked photodiodes. It can be operated as a photodiode with improved performance and wavelength-sensitive response. This paper presents a review of this device and its applications. The CMOS implementation and operating principle are firstly described. This includes the description of several key aspects directly related to the device performances, such as surface reflection, photon absorption and electron-hole pair generation, photocurrent and dark current generation, etc. SPICE modelling of the detector is then presented. Next, design and process considerations are proposed in order to improve the BDJ performance. Finally, several BDJ-detector-based image sensors provide a survey of their applications.

  9. Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique

    PubMed Central

    Fong, Chien-Fu; Dai, Ching-Liang; Wu, Chyan-Chyi

    2015-01-01

    A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm. PMID:26512671

  10. Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique.

    PubMed

    Fong, Chien-Fu; Dai, Ching-Liang; Wu, Chyan-Chyi

    2015-01-01

    A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm. PMID:26512671

  11. 2.4 GHz CMOS Power Amplifier with Mode-Locking Structure to Enhance Gain

    PubMed Central

    2014-01-01

    We propose a mode-locking method optimized for the cascode structure of an RF CMOS power amplifier. To maximize the advantage of the typical mode-locking method in the cascode structure, the input of the cross-coupled transistor is modified from that of a typical mode-locking structure. To prove the feasibility of the proposed structure, we designed a 2.4 GHz CMOS power amplifier with a 0.18 μm RFCMOS process for polar transmitter applications. The measured power added efficiency is 34.9%, while the saturated output power is 23.32 dBm. The designed chip size is 1.4 × 0.6 mm2. PMID:25045755

  12. Process architectures using MeV implanted blanket buried layers for latch-up improvements on bulk silicon

    SciTech Connect

    Rubin, L.M.; Simonton, R.B.; Wilson, S.D.; Morris, W.

    1996-12-31

    Doped buried layers formed by MeV ion implantation are attractive alternatives to expensive epitaxial substrates for controlling latch-up in CMOS devices. Two different process architecture approaches for forming effective buried layers are discussed. P+ Around Boundary (PAB), and a more recent derivative, BILLI are compared to a Buried Layer/Connecting Layer (BUCL) architecture, with regards to latch-up resistance, process flexibility, and future scalability. While both architectures have been shown to increase latch-up trigger current on bulk silicon, the BUCL process provides greater latch-up control and process/device flexibility. Process and device simulations as well as experimental data indicate that a properly chosen set of implants for both n-well, p-well, and buried layer structures can yield latch-up isolation superior to 3mm epi.

  13. Design of an ultra low power CMOS pixel sensor for a future neutron personal dosimeter

    SciTech Connect

    Zhang, Y.; Hu-Guo, C.; Husson, D.; Hu, Y.

    2011-07-01

    Despite a continuously increasing demand, neutron electronic personal dosimeters (EPDs) are still far from being completely established because their development is a very difficult task. A low-noise, ultra low power consumption CMOS pixel sensor for a future neutron personal dosimeter has been implemented in a 0.35 {mu}m CMOS technology. The prototype is composed of a pixel array for detection of charged particles, and the readout electronics is integrated on the same substrate for signal processing. The excess electrons generated by an impinging particle are collected by the pixel array. The charge collection time and the efficiency are the crucial points of a CMOS detector. The 3-D device simulations using the commercially available Synopsys-SENTAURUS package address the detailed charge collection process. Within a time of 1.9 {mu}s, about 59% electrons created by the impact particle are collected in a cluster of 4 x 4 pixels with the pixel pitch of 80 {mu}m. A charge sensitive preamplifier (CSA) and a shaper are employed in the frond-end readout. The tests with electrical signals indicate that our prototype with a total active area of 2.56 x 2.56 mm{sup 2} performs an equivalent noise charge (ENC) of less than 400 e - and 314 {mu}W power consumption, leading to a promising prototype. (authors)

  14. CMOS micromachined probes by die-level fabrication for extracellular neural recording

    NASA Astrophysics Data System (ADS)

    Ho, Meng-Han; Chen, Hsin; Tseng, Fouriers; Yeh, Shih-Rung; S-C Lu, Michael

    2007-02-01

    In this paper, we present the design, fabrication and characterization of CMOS micromachined probes for extracellular neural recording. A convenient fabrication process is proposed for making integrated recording probes at the die level, providing a low-cost solution for academic research as compared to the more expensive wafer-level approach adopted in prior work. The devices are fabricated in a standard 0.35 m CMOS process, followed by post-CMOS micromachining steps to form the probes. The on-chip circuit, used for recording action potential signals of neural activities, provides a stable dc bias when operating in electrolyte. The subthreshold transistor at the circuit input provides a tunable resistance value between 10 M? up to G?. The circuit consumes a total power of 790 W and has an output noise of 19.3 V Hz-1/2 at 100 Hz. The recorded action potential from the stimulated ventral nerve cord of a crayfish is about 0.6 mV with a pulse width of about 1.2 ms.

  15. CMOS-compatible fabrication, micromachining, and bonding strategies for silicon photonics

    NASA Astrophysics Data System (ADS)

    Heck, John; Jones, Richard; Paniccia, Mario J.

    2011-02-01

    The adoption of optical technologies by high-volume consumer markets is severely limited by the cost and complexity of manufacturing complete optical transceiver systems. This is in large part because "boutique" semiconductor fabrication processes are required for III-V lasers, modulators, and photodetectors; furthermore, precision bonding and painstaking assembly are needed to integrate or assemble such dissimilar devices and materials together. On the other hand, 200mm and 300mm silicon process technology has been bringing ever-increasing computing power to the masses by relentless cost reduction for several decades. Intel's silicon photonics program aims to marry this CMOS infrastructure and recent developments in MEMS manufacturing with the burgeoning field of microphotonics to make low cost, high-speed optical links ubiquitous. In this paper, we will provide an overview of several aspects of silicon photonics technology development in a CMOS fabrication line. First, we will describe fabrication strategies from the MEMS industry for micromachining silicon to create passive optical devices such as mirrors, waveguides, and facets, as well as alignment features. Second, we will discuss some of the challenges of fabricating hybrid III-V lasers on silicon, including such aspects as hybrid integration of InP-based materials with silicon using various bonding methods, etching of InP films, and contact formation using CMOS-compatible metals.

  16. Design and Experimental Evaluation of a 3rd Generation Addressable CMOS Piezoresistive Stress Sensing Test Chip

    SciTech Connect

    Sweet, J.N.; Peterson, D.W.; Hsia, A.H.

    1999-04-13

    Piezoresistive stress sensing chips have been used extensively for measurement of assembly related die surface stresses. Although many experiments can be performed with resistive structures which are directly bonded, for extensive stress mapping it is necessary to have a large number of sensor cells which can be addressed using CMOS logic circuitry. Our previous test chip, the ATC04, has 100 cells, each approximately 0.012 in. on a side, on a chip with a side dimension of 0.45 in. When a cell resistor is addressed, it is connected to a four terminal measurement bus through CMOS transmission gates. In theory, the gate resistances do not affect the measurement. In practice, there may be subtle effects which appear when very high accuracy is required. At high temperatures, gate leakage can increase to a point at which the resistor measurement becomes inaccurate. For ATC04 this occurred at or above 50 C. Here, we report on the first measurements obtained with a new prototype test chip, the ATC06. This prototype was fabricated in a 0.5 micron feature size silicided CMOS process using the MOSIS prototyping facility. The cell size was approximately 0.004 in. on a side. In order to achieve piezoresistive behavior for the implanted resistors it was necessary to employ a non-standard silicide ''blocking'' process. The stress sensitivity of both implanted and polysilicon blocked resistors is discussed. Using a new design strategy for the CMOS logic, it was possible to achieve a design in which only 5 signals had to be routed to a cell for addressing vs. 9 for ATC04. With our new design, the resistor under test is more effectively electrically isolated from other resistors on the chip, thereby improving high temperature performance. We present data showing operation up to 140 C.

  17. CMOS digital pixel sensors: technology and applications

    NASA Astrophysics Data System (ADS)

    Skorka, Orit; Joseph, Dileepan

    2014-04-01

    CMOS active pixel sensor technology, which is widely used these days for digital imaging, is based on analog pixels. Transition to digital pixel sensors can boost signal-to-noise ratios and enhance image quality, but can increase pixel area to dimensions that are impractical for the high-volume market of consumer electronic devices. There are two main approaches to digital pixel design. The first uses digitization methods that largely rely on photodetector properties and so are unique to imaging. The second is based on adaptation of a classical analog-to-digital converter (ADC) for in-pixel data conversion. Imaging systems for medical, industrial, and security applications are emerging lower-volume markets that can benefit from these in-pixel ADCs. With these applications, larger pixels are typically acceptable, and imaging may be done in invisible spectral bands.

  18. A RAM based CMOS histogrammer integrated circuit

    NASA Astrophysics Data System (ADS)

    Slorach, F.; Alsford, J. R.

    1988-02-01

    A histogramming integrated circuit has been designed with 256 24-bit cells. The pipelined RAM-based architecture has been designed to give histogram capture rates of at least 8 MHz. The chip is capable of histogramming an entire 512 x 512 image with an 8-bit gray level in real time and is fully cascadable for increased histogram resolution or capacity. The RAM is accessable for random read/write operations through the 24-bit data and 8-bit address busses. Additional features include global thresholding, sequential read/clear, and a simple self-test on the RAM. The chip was designed using an integrated design system with a ramcell compiler and is being fabricated in a 2-micron CMOS technology.

  19. Latchup in CMOS devices from heavy ions

    NASA Technical Reports Server (NTRS)

    Soliman, K.; Nichols, D. K.

    1983-01-01

    It is noted that complementary metal oxide semiconductor (CMOS) microcircuits are inherently latchup prone. The four-layer n-p-n-p structures formed from the parasitic pnp and npn transistors make up a silicon controlled rectifier. If properly biased, this rectifier may be triggered 'ON' by electrical transients, ionizing radiation, or a single heavy ion. This latchup phenomenon might lead to a loss of functionality or device burnout. Results are presented from tests on 19 different device types from six manufacturers which investigate their latchup sensitivity with argon and krypton beams. The parasitic npnp paths are identified in general, and a qualitative rationale is given for latchup susceptibility, along with a latchup cross section for each type of device. Also presented is the correlation between bit-flip sensitivity and latchup susceptibility.

  20. CMOS imager for pointing and tracking applications

    NASA Technical Reports Server (NTRS)

    Pain, Bedabrata (Inventor); Sun, Chao (Inventor); Yang, Guang (Inventor); Heynssens, Julie B. (Inventor)

    2006-01-01

    Systems and techniques to realize pointing and tracking applications with CMOS imaging devices. In general, in one implementation, the technique includes: sampling multiple rows and multiple columns of an active pixel sensor array into a memory array (e.g., an on-chip memory array), and reading out the multiple rows and multiple columns sampled in the memory array to provide image data with reduced motion artifact. Various operation modes may be provided, including TDS, CDS, CQS, a tracking mode to read out multiple windows, and/or a mode employing a sample-first-read-later readout scheme. The tracking mode can take advantage of a diagonal switch array. The diagonal switch array, the active pixel sensor array and the memory array can be integrated onto a single imager chip with a controller. This imager device can be part of a larger imaging system for both space-based applications and terrestrial applications.

  1. Modulated CMOS camera for fluorescence lifetime microscopy.

    PubMed

    Chen, Hongtao; Holst, Gerhard; Gratton, Enrico

    2015-12-01

    Widefield frequency-domain fluorescence lifetime imaging microscopy (FD-FLIM) is a fast and accurate method to measure the fluorescence lifetime of entire images. However, the complexity and high costs involved in construction of such a system limit the extensive use of this technique. PCO AG recently released the first luminescence lifetime imaging camera based on a high frequency modulated CMOS image sensor, QMFLIM2. Here we tested and provide operational procedures to calibrate the camera and to improve the accuracy using corrections necessary for image analysis. With its flexible input/output options, we are able to use a modulated laser diode or a 20 MHz pulsed white supercontinuum laser as the light source. The output of the camera consists of a stack of modulated images that can be analyzed by the SimFCS software using the phasor approach. The nonuniform system response across the image sensor must be calibrated at the pixel level. This pixel calibration is crucial and needed for every camera settings, e.g. modulation frequency and exposure time. A significant dependency of the modulation signal on the intensity was also observed and hence an additional calibration is needed for each pixel depending on the pixel intensity level. These corrections are important not only for the fundamental frequency, but also for the higher harmonics when using the pulsed supercontinuum laser. With these post data acquisition corrections, the PCO CMOS-FLIM camera can be used for various biomedical applications requiring a large frame and high speed acquisition. Microsc. Res. Tech. 78:1075-1081, 2015. 2015 Wiley Periodicals, Inc. PMID:26500051

  2. Tests of commercial colour CMOS cameras for astronomical applications

    NASA Astrophysics Data System (ADS)

    Pokhvala, S. M.; Reshetnyk, V. M.; Zhilyaev, B. E.

    2013-12-01

    We present some results of testing commercial colour CMOS cameras for astronomical applications. Colour CMOS sensors allow to perform photometry in three filters simultaneously that gives a great advantage compared with monochrome CCD detectors. The Bayer BGR colour system realized in colour CMOS sensors is close to the astronomical Johnson BVR system. The basic camera characteristics: read noise (e^{-}/pix), thermal noise (e^{-}/pix/sec) and electronic gain (e^{-}/ADU) for the commercial digital camera Canon 5D MarkIII are presented. We give the same characteristics for the scientific high performance cooled CCD camera system ALTA E47. Comparing results for tests of Canon 5D MarkIII and CCD ALTA E47 show that present-day commercial colour CMOS cameras can seriously compete with the scientific CCD cameras in deep astronomical imaging.

  3. Formal specification of a high speed CMOS correlator

    NASA Technical Reports Server (NTRS)

    Windley, P. J.

    1991-01-01

    The formal specification of a high speed CMOS correlator is presented. The specification gives the high-level behavior of the correlator and provides a clear, unambiguous description of the high-level architecture of the device.

  4. Failures Of CMOS Devices At Low Radiation-Dose Rates

    NASA Technical Reports Server (NTRS)

    Goben, Charles A.; Price, William E.

    1990-01-01

    Method for obtaining approximate failure-versus-dose-rate curves derived from experiments on failures of SGS 4007 complementary metal oxide/semiconductor (CMOS) integrated circuits irradiated by Co60 and Cs137 radioactive sources.

  5. CMOS Active Pixel Sensor Technology and Reliability Characterization Methodology

    NASA Technical Reports Server (NTRS)

    Chen, Yuan; Guertin, Steven M.; Pain, Bedabrata; Kayaii, Sammy

    2006-01-01

    This paper describes the technology, design features and reliability characterization methodology of a CMOS Active Pixel Sensor. Both overall chip reliability and pixel reliability are projected for the imagers.

  6. CMOS front end electronics for the ATLAS muon detector

    SciTech Connect

    Huth, J.; Oliver, J.; Hazen, E.; Shank, J.

    1997-12-31

    An all-CMOS design for an integrated ASD (Amplifier-Shaper-Discriminator) chip for readout of the ATLAS Monitored Drift Tubes (MDTs) is presented. Eight channels of charge-sensitive preamp, two-stage pole/zero shaper, Wilkinson ADC and discriminator with programmable hysteresis are integrated on a single IC. Key elements have been prototyped in 1.2 and 0.5 micron CMOS operating at 5V and 3.3V respectively.

  7. CMOS Image Sensors: Electronic Camera On A Chip

    NASA Technical Reports Server (NTRS)

    Fossum, E. R.

    1995-01-01

    Recent advancements in CMOS image sensor technology are reviewed, including both passive pixel sensors and active pixel sensors. On- chip analog to digital converters and on-chip timing and control circuits permit realization of an electronic camera-on-a-chip. Highly miniaturized imaging systems based on CMOS image sensor technology are emerging as a competitor to charge-coupled devices for low cost uses.

  8. CMOS direct time interval measurement of long-lived luminescence lifetimes.

    PubMed

    Yao, Lei; Yung, Ka Yi; Cheung, Maurice C; Chodavarapu, Vamsy P; Bright, Frank V

    2011-01-01

    We describe a Complementary Metal-Oxide Semiconductor (CMOS) Direct Time Interval Measurement (DTIM) Integrated Circuit (IC) to detect the decay (fall) time of the luminescence emission when analyte-sensitive luminophores are excited with an optical pulse. The CMOS DTIM IC includes 14 14 phototransistor array, transimpedance amplifier, regulated gain amplifier, fall time detector, and time-to-digital convertor. We examined the DTIM system to measure the emission lifetime of oxygen-sensitive luminophores tris(4,7-diphenyl-1, 10-phenanthroline) ruthenium(II) ([Ru(dpp)(3)](2+)) encapsulated in sol-gel derived xerogel thin-films. The DTIM system fabricated using TSMC 0.35 ?m process functions to detect lifetimes from 4 ?s to 14.4 ?s but can be tuned to detect longer lifetimes. The system provides 8-bit digital output proportional to lifetimes and consumes 4.5 mW of power with 3.3 V DC supply. The CMOS system provides a useful platform for the development of reliable, robust, and miniaturized optical chemical sensors. PMID:22254237

  9. A new circuit technique for reduced leakage current in Deep Submicron CMOS technologies

    NASA Astrophysics Data System (ADS)

    Schmitz, A.; Tielert, R.

    2005-05-01

    Modern CMOS processes in the Deep Submicron regime are restricted to supply voltages below 2 volts and further to account for the transistors' field strength limitations and to reduce the power per logic gate. To maintain the high switching performance, the threshold voltage must be scaled according with the supply voltage. However, this leads to an increased subthreshold current of the transistors in standby mode (VGS=0). Another source of leakage is gate current, which becomes significant for gate oxides of 3nm and below. We propose a Self-Biasing Virtual Rails (SBVR) - CMOS technique which acts like an adaptive local supply voltage in case of standby mode. Most important sources of leakage currents are reduced by this technique. Moreover, SBVR-CMOS is capable of conserving stored information in sleep mode, which is vital for memory circuits. Memories are exposed to radiation causing soft errors. This well-known problem becomes even worse in standby mode of typical SRAMs, that have low driving performance to withstand alpha particle hits. In this paper, a 16-transistor SRAM cell is proposed, which combines the advantage of extremely low leakage currents with a very high soft error stability.

  10. Optimizing electronic standard cell libraries for variability tolerance through the nano-CMOS grid.

    PubMed

    Walker, James Alfred; Sinnott, Richard; Stewart, Gordon; Hilder, James A; Tyrrell, Andy M

    2010-08-28

    The project Meeting the Design Challenges of nano-CMOS Electronics (http://www.nanocmos.ac.uk) was funded by the Engineering and Physical Sciences Research Council to tackle the challenges facing the electronics industry caused by the decreasing scale of transistor devices, and the inherent variability that this exposes in devices and in the circuits and systems in which they are used. The project has developed a grid-based solution that supports the electronics design process, incorporating usage of large-scale high-performance computing (HPC) resources, data and metadata management and support for fine-grained security to protect commercially sensitive datasets. In this paper, we illustrate how the nano-CMOS (complementary metal oxide semiconductor) grid has been applied to optimize transistor dimensions within a standard cell library. The goal is to extract high-speed and low-power circuits which are more tolerant of the random fluctuations that will be prevalent in future technology nodes. Using statistically enhanced circuit simulation models based on three-dimensional atomistic device simulations, a genetic algorithm is presented that optimizes the device widths within a circuit using a multi-objective fitness function exploiting the nano-CMOS grid. The results show that the impact of threshold voltage variation can be reduced by optimizing transistor widths, and indicate that a similar method could be extended to the optimization of larger circuits. PMID:20643688

  11. RF Design of a Wideband CMOS Integrated Receiver for Phased Array Applications

    NASA Astrophysics Data System (ADS)

    Jackson, Suzy A.

    2004-06-01

    New silicon CMOS processes developed primarily for the burgeoning wireless networking market offer significant promise as a vehicle for the implementation of highly integrated receivers, especially at the lower end of the frequency range proposed for the Square Kilometre Array (SKA). An RF-CMOS ‘Receiver-on-a-Chip’ is being developed as part of an Australia Telescope program looking at technologies associated with the SKA. The receiver covers the frequency range 500 1700 MHz, with instantaneous IF bandwidth of 500 MHz and, on simulation, yields an input noise temperature of < 50 K at mid-band. The receiver will contain all active circuitry (LNA, bandpass filter, quadrature mixer, anti-aliasing filter, digitiser and serialiser) on one 0.18 μm RF-CMOS integrated circuit. This paper outlines receiver front-end development work undertaken to date, including design and simulation of an LNA using noise cancelling techniques to achieve a wideband input-power-match with little noise penalty.

  12. Automation of CMOS technology migration illustrated by RGB to YCrCb analogue converter

    NASA Astrophysics Data System (ADS)

    Naumowicz, M.; Melosik, M.; Katarzynski, P.; Handkiewicz, A.

    2013-09-01

    The paper illustrates a practical example of technology migration applied to the colour space converter realized in CMOS technology. The element has analogue excitation and response signals expressed in current mode. Such converter may be incorporated into an integrated vision sensor for preconditioning acquired image data. The idea of a computer software tool supporting the automated migration and design reuse is presented as the major contribution. The mentioned tools implement the Hooke-Jeeves direct search method for performing the multivariable optimization. Our purpose is to ensure transferring the circuit between usable fabrication technologies and preserving its functional properties. The colour space converter is treated as the case study for performance evaluation of the proposed tool in cooperation with HSPICE simulation software. The original CMOS technology files for Taiwan semiconductor (TSMC) plant were utilized for the research. The automated design migration from 180 nm into 90 nm resulted with obtaining compact IC layout characterized by a smaller area and lower power consumption. The paper is concluded with a brief summary that proves the usability of the proposed tool in designing CMOS cells dedicated for low power image processing.

  13. Designing and implementing a miniature CMOS imaging system with USB interface

    NASA Astrophysics Data System (ADS)

    Yao, Chenyun; Wang, Liqiang; Yuan, Bo; Xu, Jin

    2012-11-01

    Although CMOS cameras with USB interface are popular, their sizes are not small enough and working lengths are not that long enough when used as industrial endoscope. Here we present a small-sized image acquisition system for high-definition industrial electronic endoscope based on USB2.0 high-speed controller, which is composed of a 1/6 inch CMOS image sensor with resolution of 1 Megapixels. Signals from the CMOS image sensor are put into computer through the USB interface using the slave FIFO mode for processing, storage and display. LVDS technology is used for image data stream transmission between the sensor and USB controller to realize a long working distance, high signal integrity and low noise system. The maximum pixel clock runs at 48MHz to support for 30 fps for QSXGA mode or15 fps for SXGA mode and the data transmission rate can reach 36 megabytes per second. The imaging system is simple in structure, low-power, low-cost and easy to control. Based on multi-thread technology, the software system which realizes the function of automatic exposure, automatic gain, and AVI video recording is also designed.

  14. Design and Fabrication of Millimeter Wave Hexagonal Nano-Ferrite Circulator on Silicon CMOS Substrate

    NASA Astrophysics Data System (ADS)

    Oukacha, Hassan

    The rapid advancement of Complementary Metal Oxide Semiconductor (CMOS) technology has formed the backbone of the modern computing revolution enabling the development of computationally intensive electronic devices that are smaller, faster, less expensive, and consume less power. This well-established technology has transformed the mobile computing and communications industries by providing high levels of system integration on a single substrate, high reliability and low manufacturing cost. The driving force behind this computing revolution is the scaling of semiconductor devices to smaller geometries which has resulted in faster switching speeds and the promise of replacing traditional, bulky radio frequency (RF) components with miniaturized devices. Such devices play an important role in our society enabling ubiquitous computing and on-demand data access. This thesis presents the design and development of a magnetic circulator component in a standard 180 nm CMOS process. The design approach involves integration of nanoscale ferrite materials on a CMOS chip to avoid using bulky magnetic materials employed in conventional circulators. This device constitutes the next generation broadband millimeter-wave circulator integrated in CMOS using ferrite materials operating in the 60GHz frequency band. The unlicensed ultra-high frequency spectrum around 60GHz offers many benefits: very high immunity to interference, high security, and frequency re-use. Results of both simulations and measurements are presented in this thesis. The presented results show the benefits of this technique and the potential that it has in incorporating a complete system-on-chip (SoC) that includes low noise amplifier, power amplier, and antenna. This system-on-chip can be used in the same applications where the conventional circulator has been employed, including communication systems, radar systems, navigation and air traffic control, and military equipment. This set of applications of circulator shows how crucial this device is to many industries and the need for smaller, cost effective RF components.

  15. Totally self-checking circuits and testable CMOS circuits

    NASA Astrophysics Data System (ADS)

    Jha, N. K.

    1986-06-01

    A Totally Self-Checking (TSC) circuit belongs to a class of circuits used for Concurrent Error Detection (CED) purposes. It consists of a functional circuit that has encoded inputs and outputs and a checker that monitors these outputs and gives and error indication. It is known that the traditional stuck-at fault model is not sufficient to model realistic physical failures. Techniques for implementing existing gate-level TSC circuits in CMOS, Domino-CMOS and standard CMOS technologies, so that they are TSC with respect to physical failures, are described. Design methods which reduce the transistor count, delay, and the number of tests of TSC checkers are also given. Another problem in the area of TSC circuits concerns embedded checkers whose inputs are not directly controllable. If they do not get all the required codewords to test them they cannot be guaranteed to be TSC. A new encoding technique and a design procedure to solve this problem are presented. It has been shown previously that the two-pattern tests used to test CMOS circuits can be invalidated by timing skews. A necessary and sufficient condition is derived to find out whether or not an AND-OR or and OR-AND CMOS realization exists for a given function so that a valid test set can always be found, even in the presence of arbitrary timing skews. A new Hybrid CMOS realization is introduced to take care of the cases in which this is not possible.

  16. Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS

    SciTech Connect

    Smith, J.H.; Montague, S.; Sniegowski, J.J.; Murray, J.R.

    1996-10-01

    Recently, a great deal of interest has developed in manufacturing processes that allow the monolithic integration of MicroElectroMechanical Systems (MEMS) with driving, controlling, and signal processing electronics. This integration promises to improve the performance of micromechanical devices as well as lower the cost of manufacturing, packaging, and instrumenting these devices by combining the micromechanical devices with a electronic devices in the same manufacturing and packaging process. In order to maintain modularity and overcome some of the manufacturing challenges of the CMOS-first approach to integration, we have developed a MEMS-first process. This process places the micromechanical devices in a shallow trench, planarizes the wafer, and seals the micromechanical devices in the trench. Then, a high-temperature anneal is performed after the devices are embedded in the trench prior to microelectronics processing. This anneal stress-relieves the micromechanical polysilicon and ensures that the subsequent thermal processing associated with fabrication of the microelectronic processing does not adversely affect the mechanical properties of the polysilicon structures. These wafers with the completed, planarized micromechanical devices are then used as starting material for conventional CMOS processes. The circuit yield for the process has exceeded 98%. A description of the integration technology, the refinements to the technology, and wafer-scale parametric measurements of device characteristics is presented. Additionally, the performance of integrated sensing devices built using this technology is presented.

  17. An RF energy harvester system using UHF micropower CMOS rectifier based on a diode connected CMOS transistor.

    PubMed

    Shokrani, Mohammad Reza; Khoddam, Mojtaba; Hamidon, Mohd Nizar B; Kamsani, Noor Ain; Rokhani, Fakhrul Zaman; Shafie, Suhaidi Bin

    2014-01-01

    This paper presents a new type diode connected MOS transistor to improve CMOS conventional rectifier's performance in RF energy harvester systems for wireless sensor networks in which the circuits are designed in 0.18? ?m TSMC CMOS technology. The proposed diode connected MOS transistor uses a new bulk connection which leads to reduction in the threshold voltage and leakage current; therefore, it contributes to increment of the rectifier's output voltage, output current, and efficiency when it is well important in the conventional CMOS rectifiers. The design technique for the rectifiers is explained and a matching network has been proposed to increase the sensitivity of the proposed rectifier. Five-stage rectifier with a matching network is proposed based on the optimization. The simulation results shows 18.2% improvement in the efficiency of the rectifier circuit and increase in sensitivity of RF energy harvester circuit. All circuits are designed in 0.18 ?m TSMC CMOS technology. PMID:24782680

  18. An RF Energy Harvester System Using UHF Micropower CMOS Rectifier Based on a Diode Connected CMOS Transistor

    PubMed Central

    Shokrani, Mohammad Reza; Hamidon, Mohd Nizar B.; Rokhani, Fakhrul Zaman; Shafie, Suhaidi Bin

    2014-01-01

    This paper presents a new type diode connected MOS transistor to improve CMOS conventional rectifier's performance in RF energy harvester systems for wireless sensor networks in which the circuits are designed in 0.18??m TSMC CMOS technology. The proposed diode connected MOS transistor uses a new bulk connection which leads to reduction in the threshold voltage and leakage current; therefore, it contributes to increment of the rectifier's output voltage, output current, and efficiency when it is well important in the conventional CMOS rectifiers. The design technique for the rectifiers is explained and a matching network has been proposed to increase the sensitivity of the proposed rectifier. Five-stage rectifier with a matching network is proposed based on the optimization. The simulation results shows 18.2% improvement in the efficiency of the rectifier circuit and increase in sensitivity of RF energy harvester circuit. All circuits are designed in 0.18??m TSMC CMOS technology. PMID:24782680

  19. A CMOS ASIC Design for SiPM Arrays

    PubMed Central

    Dey, Samrat; Banks, Lushon; Chen, Shaw-Pin; Xu, Wenbin; Lewellen, Thomas K.; Miyaoka, Robert S.; Rudell, Jacques C.

    2012-01-01

    Our lab has previously reported on novel board-level readout electronics for an 88 silicon photomultiplier (SiPM) array featuring row/column summation technique to reduce the hardware requirements for signal processing. We are taking the next step by implementing a monolithic CMOS chip which is based on the row-column architecture. In addition, this paper explores the option of using diagonal summation as well as calibration to compensate for temperature and process variations. Further description of a timing pickoff signal which aligns all of the positioning (spatial channels) pulses in the array is described. The ASIC design is targeted to be scalable with the detector size and flexible to accommodate detectors from different vendors. This paper focuses on circuit implementation issues associated with the design of the ASIC to interface our Phase II MiCES FPGA board with a SiPM array. Moreover, a discussion is provided for strategies to eventually integrate all the analog and mixed-signal electronics with the SiPM, on either a single-silicon substrate or multi-chip module (MCM). PMID:24825923

  20. Design of millimeter-wave MEMS-based reconfigurable front-end circuits using the standard CMOS technology

    NASA Astrophysics Data System (ADS)

    Chang, Chia-Chan; Hsieh, Sheng-Chi; Chen, Chien-Hsun; Huang, Chin-Yen; Yao, Chun-Han; Lin, Chun-Chi

    2011-12-01

    This paper describes the designs of three reconfigurable CMOS-MEMS front-end components for V-/W-band applications. The suspended MEMS structure is released through post-CMOS micromachining. To achieve circuit reconfigurability, dual-state and multi-state fishbone-beam-drive actuators are proposed herein. The reconfigurable bandstop is fabricated in a 0.35 m CMOS process with the chip size of 0.765 0.98 mm2, showing that the stop-band frequency can be switched from 60 to 50 GHz with 40 V actuation voltage. The measured isolation is better than 38 dB at 60 GHz and 34 dB at 50 GHz, respectively. The bandpass filter-integrated single-pole single-throw switch, using the 0.18 m CMOS process, demonstrates that insertion loss and return loss are better than 6.2 and 15 dB from 88 to 100 GHz in the on-state, and isolation is better than 21 dB in the off-state with an actuation voltage of 51 V. The chip size is 0.7 1.04 mm2. The third component is a reconfigurable slot antenna fabricated in a 0.18 m CMOS process with the chip size of 1.2 1.2 mm2. By utilizing the multi-state actuators, the frequencies of this antenna can be switched to 43, 47, 50.5, 54, 57.5 GHz with return loss better than 20 dB. Those circuits demonstrate good RF performance and are relatively compact by employing several size miniaturizing techniques, thereby enabling a great potential for the future single-chip transceiver.

  1. Bench-level characterization of a CMOS standard-cell D-latch using alpha-particle sensitive test circuits

    NASA Technical Reports Server (NTRS)

    Blaes, B. R.; Soli, G. A.; Buehler, M. G.

    1991-01-01

    A methodology is described for predicting the SEU susceptibility of a standard-cell D-latch using an alpha-particle sensitive SRAM, SPICE critical charge simulation results, and alpha-particle interaction physics. Measurements were made on a 1.6-micron n-well CMOS 4-kb test SRAM irradiated with an Am-241 alpha-particle source. A collection depth of 6.09 micron was determined using these results and TRIM computer code. Using this collection depth and SPICE derived critical charge results on the latch design, an LET threshold of 34 MeV sq cm/mg was predicted. Heavy ion tests were then performed on the latch and an LET threshold of 41 MeV sq cm/mg was determined.

  2. Bench-level characterization of a CMOS standard-cell D-latch using alpha-particle sensitive test circuits

    SciTech Connect

    Blaes, B.R.; Soli, G.A.; Buehler, M.G. )

    1991-12-01

    This paper describes a methodology for predicting the SEU susceptibility of a standard-cell D-latch using an alpha-particle sensitive SRAM, SPICE critical charge simulation results, and alpha-particle interaction physics. Measurements were made on a 1.6-{mu}m n-well CMOS 4k-bit test SRAM irradiated with an Am-241 alpha-particle source. A collection depth of 6.09 {mu}m was determined using these results and TRIM computer code. Using this collection depth and SPICE derived critical charge results on the latch design, an LET threshold of 34 Mev cm{sup 2}/mg was predicted. Heavy ion tests were then performed on the latch and an LET threshold of 41 MeV cm{sup 2}/mg was determined.

  3. Analysis of USJ formation with combined RTA/laser annealing conditions for 28 nm high-k/metal gate CMOS technology using advanced TCAD for process and device simulation

    NASA Astrophysics Data System (ADS)

    Bazizi, E. M.; Zaka, A.; Benistant, F.

    2013-05-01

    TCAD process and device simulations are used to gain physical understanding for the integration of laser-annealed junctions into a 28 nm high-k/metal gate first process flow. Spike-RTA (Rapid Thermal Annealing) scaling used for transient enhanced diffusion (TED) suppression and shallow extension formation is investigated. In order to overcome the performance loss due to a reduced RTA, laser anneal (lsa) is introduced after Spike-RTA to form highly activated and ultra shallow junctions (USJs). In this work, the impact of different annealing conditions on the performance of NMOS and PMOS devices is investigated in terms of Vth and Ion/Ioff, considering lateral dopant diffusion and activation.

  4. System-in Package of Integrated Humidity Sensor Using CMOS-MEMS Technology.

    PubMed

    Lee, Sung Pil

    2015-10-01

    Temperature/humidity microchips with micropump were fabricated using a CMOS-MEMS process and combined with ZigBee modules to implement a sensor system in package (SIP) for a ubiquitous sensor network (USN) and/or a wireless communication system. The current of a diode temperature sensor to temperature and a normalized current of FET humidity sensor to relative humidity showed linear characteristics, respectively, and the use of the micropump has enabled a faster response. A wireless reception module using the same protocol as that in transmission systems processed the received data within 10 m and showed temperature and humidity values in the display. PMID:26726359

  5. A CMOS readout circuit for microstrip detectors

    NASA Astrophysics Data System (ADS)

    Nasri, B.; Fiorini, C.

    2015-03-01

    In this work, we present the design and the results of a CMOS analog channel for silicon microstrips detectors. The readout circuit was initially conceived for the outer layers of the SuperB silicon vertex tracker (SVT), but can serve more generally other microstrip-based detection systems. The strip detectors considered show a very high stray capacitance and high series resistance. Therefore, the noise optimization was the first priority design concern. A necessary compromise on the best peaking time to achieve an acceptable noise level together with efficiency and timing accuracy has been investigated. The ASIC is composed by a preamplifier, shaping amplifier and a Time over Threshold (T.o.T) block for the digitalization of the signals. The chosen shaping function is the third-order semi-Gaussian function implemented with complex poles. An inverter stage is employed in the analog channel in order to operate with signals delivered from both p and n strips. The circuit includes the possibility to select the peaking time of the shaper output from four values: 250 ns, 375 ns, 500 ns and 750 ns. In this way, the noise performances and the signal occupancy can be optimized according to the real background during the experiment. The ASIC prototype has been fabricated in the 130 nm IBM technology which is considered intrinsically radiation hard. The results of the experimental characterization of a produced prototype are satisfactorily matched with simulation.

  6. PostCMOS compatible sacrificial layers for aluminum nitride microcantilevers

    NASA Astrophysics Data System (ADS)

    Prez-Campos, Ana; Iriarte, Gonzalo Fuentes; Lebedev, Vadim; Calle, Fernando

    2014-10-01

    This report shows different fabrication procedures followed to obtain piezoelectric microcantilevers. The proposed microcantilever is a sandwich structure composed of chromium (Cr) electrodes (from 50 to 300-nm thick) and a reactive sputtered piezoelectric aluminum nitride (AlN) thin film (from 350 nm to 600-nm thick). The microcantilevers top-view dimensions ranged from 50 to 300 ?m in width and from to 250 to 700 ?m in length. Several materials such as nickel silicide and nickel, as well as a photoresist, and finally the silicon substrate surface have been investigated to discern their possibilities and limitations when used as sacrificial layers. These materials have been studied to determine the optimal processing steps and chemistries required for each of them. The easiest and the only successful microcantilevers release was finally obtained using the top silicon substrate surface as a sacrificial layer. The structural and morphological characteristics of the microcantilevers are presented as well as their piezoelectric character. The main difference of this work resides in the Si surface-based microcantilever release technique. This, along with the synthesis of AlN at room temperature by reactive sputtering, establishes a manufacturing procedure for piezoelectric microbeams, which makes possible the integration of such MEMS devices into postCMOS technology.

  7. Smart CMOS sensor for wideband laser threat detection

    NASA Astrophysics Data System (ADS)

    Schwarze, Craig R.; Sonkusale, Sameer

    2015-09-01

    The proliferation of lasers has led to their widespread use in applications ranging from short range standoff chemical detection to long range Lidar sensing and target designation operating across the UV to LWIR spectrum. Recent advances in high energy lasers have renewed the development of laser weapons systems. The ability to measure and assess laser source information is important to both identify a potential threat as well as determine safety and nominal hazard zone (NHZ). Laser detection sensors are required that provide high dynamic range, wide spectral coverage, pulsed and continuous wave detection, and large field of view. OPTRA, Inc. and Tufts have developed a custom ROIC smart pixel imaging sensor architecture and wavelength encoding optics for measurement of source wavelength, pulse length, pulse repetition frequency (PRF), irradiance, and angle of arrival. The smart architecture provides dual linear and logarithmic operating modes to provide 8+ orders of signal dynamic range and nanosecond pulse measurement capability that can be hybridized with the appropriate detector array to provide UV through LWIR laser sensing. Recent advances in sputtering techniques provide the capability for post-processing CMOS dies from the foundry and patterning PbS and PbSe photoconductors directly on the chip to create a single monolithic sensor array architecture for measuring sources operating from 0.26 - 5.0 microns, 1 mW/cm2 - 2 kW/cm2.

  8. Design of a CMOS Potentiostat Circuit for Electrochemical Detector Arrays

    PubMed Central

    Ayers, Sunitha; Gillis, Kevin D.; Lindau, Manfred; Minch, Bradley A.

    2010-01-01

    High-throughput electrode arrays are required for advancing devices for testing the effect of drugs on cellular function. In this paper, we present design criteria for a potentiostat circuit that is capable of measuring transient amperometric oxidation currents at the surface of an electrode with submillisecond time resolution and picoampere current resolution. The potentiostat is a regulated cascode stage in which a high-gain amplifier maintains the electrode voltage through a negative feedback loop. The potentiostat uses a new shared amplifier structure in which all of the amplifiers in a given row of detectors share a common half circuit permitting us to use fewer transistors per detector. We also present measurements from a test chip that was fabricated in a 0.5-?m, 5-V CMOS process through MOSIS. Each detector occupied a layout area of 35?m 15?m and contained eight transistors and a 50-fF integrating capacitor. The rms current noise at 2kHz bandwidth is ? 110fA. The maximum charge storage capacity at 2kHz is 1.26 106 electrons. PMID:20514150

  9. Passive radiation detection using optically active CMOS sensors

    NASA Astrophysics Data System (ADS)

    Dosiek, Luke; Schalk, Patrick D.

    2013-05-01

    Recently, there have been a number of small-scale and hobbyist successes in employing commodity CMOS-based camera sensors for radiation detection. For example, several smartphone applications initially developed for use in areas near the Fukushima nuclear disaster are capable of detecting radiation using a cell phone camera, provided opaque tape is placed over the lens. In all current useful implementations, it is required that the sensor not be exposed to visible light. We seek to build a system that does not have this restriction. While building such a system would require sophisticated signal processing, it would nevertheless provide great benefits. In addition to fulfilling their primary function of image capture, cameras would also be able to detect unknown radiation sources even when the danger is considered to be low or non-existent. By experimentally profiling the image artifacts generated by gamma ray and ? particle impacts, algorithms are developed to identify the unique features of radiation exposure, while discarding optical interaction and thermal noise effects. Preliminary results focus on achieving this goal in a laboratory setting, without regard to integration time or computational complexity. However, future work will seek to address these additional issues.

  10. CMOS solid state photomultipliers for ultra-low light levels

    NASA Astrophysics Data System (ADS)

    Johnson, Erik B.; Stapels, Christopher J.; Chen, Xaio Jie; Whitney, Chad; Chapman, Eric C.; Alberghini, Guy; Rines, Rich; Augustine, Frank; Christian, James

    2011-05-01

    Detection of single photons is crucial for a number of applications. Geiger photodiodes (GPD) provide large gains with an insignificant amount of multiplication noise exclusively from the diode. When the GPD is operated above the reverse bias breakdown voltage, the diode can avalanche due to charged pairs generated from random noise (typically thermal) or incident photons. The GPD is a binary device, as only one photon is needed to trigger an avalanche, regardless of the number of incident photons. A solid-state photomultiplier (SSPM) is an array of GPDs, and the output of the SSPM is proportional to the incident light intensity, providing a replacement for photomultiplier tubes. We have developed CMOS SSPMs using a commercial fabrication process for a myriad of applications. We present results on the operation of these devices for low intensity light pulses. The data analysis provides a measured of the junction capacitance (~150 fF), which affects the rise time (~2 ns), the fall time (~32 ns), and gain (>106). Multipliers for the cross talk and after pulsing are given, and a consistent picture within the theory of operation of the expected dark current and photodetection efficiency is demonstrate. Enhancement of the detection efficiency with respect to the quantum efficiency at unity gain for shallow UV photons is measured, indicating an effect due to fringe fields within the diode structure. The signal and noise terms have been deconvolved from each other, providing the fundamental model for characterizing the behavior at low-light intensities.

  11. A Radiation Hardened by Design CMOS ASIC for Thermopile Readouts

    NASA Technical Reports Server (NTRS)

    Quilligan, G.; Aslam, S.; DuMonthier, J.

    2012-01-01

    A radiation hardened by design (RHBD) mixed-signal application specific integrated circuit (ASIC) has been designed for a thermopile readout for operation in the harsh Jovian orbital environment. The multi-channel digitizer (MCD) ASIC includes 18 low noise amplifier channels which have tunable gain/filtering coefficients, a 16-bit sigma-delta analog-digital converter (SDADC) and an on-chip controller. The 18 channels, SDADC and controller were designed to operate with immunity to single event latchup (SEL) and to at least 10 Mrad total ionizing dose (TID). The ASIC also contains a radiation tolerant 16-bit 20 MHz Nyquist ADC for general purpose instrumentation digitizer needs. The ASIC is currently undergoing fabrication in a commercial 180 nm CMOS process. Although this ASIC was designed specifically for the harsh radiation environment of the NASA led JEO mission it is suitable for integration into instrumentation payloads 011 the ESA JUICE mission where the radiation hardness requirements are slightly less stringent.

  12. A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications

    PubMed Central

    Deng, Fangming; He, Yigang; Li, Bing; Zuo, Lei; Wu, Xiang; Fu, Zhihui

    2015-01-01

    This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer release, resulting in a sensitivity of 1.2 fF/kPa within the range from 0 to 600 kPa. A three-stage rectifier adopts a chain of auxiliary floating rectifier cells to boost the gate voltage of the switching transistors, resulting in a power conversion efficiency of 53% at the low input power of −20 dBm. The capacitive sensor interface, using phase-locked loop archietcture, employs fully-digital blocks, which results in a 7.4 bits resolution and 0.8 µW power dissipation at 0.8 V supply voltage. The proposed passive wireless pressure sensor tag costs a total 3.2 µW power dissipation. PMID:25806868

  13. A CMOS pressure sensor tag chip for passive wireless applications.

    PubMed

    Deng, Fangming; He, Yigang; Li, Bing; Zuo, Lei; Wu, Xiang; Fu, Zhihui

    2015-01-01

    This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer release, resulting in a sensitivity of 1.2 fF/kPa within the range from 0 to 600 kPa. A three-stage rectifier adopts a chain of auxiliary floating rectifier cells to boost the gate voltage of the switching transistors, resulting in a power conversion efficiency of 53% at the low input power of -20 dBm. The capacitive sensor interface, using phase-locked loop archietcture, employs fully-digital blocks, which results in a 7.4 bits resolution and 0.8 µW power dissipation at 0.8 V supply voltage. The proposed passive wireless pressure sensor tag costs a total 3.2 µW power dissipation. PMID:25806868

  14. An electrostatic CMOS/BiCMOS Lithium ion vibration-based harvester-charger IC

    NASA Astrophysics Data System (ADS)

    Torres, Erick Omar

    Self-powered microsystems, such as wireless transceiver microsensors, appeal to an expanding application space in monitoring, control, and diagnosis for commercial, industrial, military, space, and biomedical products. As these devices continue to shrink, their microscale dimensions allow them to be unobtrusive and economical, with the potential to operate from typically unreachable environments and, in wireless network applications, deploy numerous distributed sensing nodes simultaneously. Extended operational life, however, is difficult to achieve since their limited volume space constrains the stored energy available, even with state-of-the-art technologies, such as thin-film lithium-ion batteries (Li Ion) and micro-fuel cells. Harvesting ambient energy overcomes this deficit by continually replenishing the energy reservoir and, as a result, indefinitely extending system lifetime. In this work, an electrostatic harvester that harnesses ambient kinetic energy from vibrations to charge an energy-storage device (e.g., a battery) is investigated, developed, and evaluated. The proposed harvester charges and holds the voltage across a vibration-sensitive variable capacitor so that vibrations can induce it to generate current into the battery when capacitance decreases (as its plates separate). The challenge is that energy is harnessed at relatively slow rates, producing low output power, and the electronics required to transfer it to charge a battery can easily demand more than the power produced. To this end, the system reduces losses by time-managing and biasing its circuits to operate only when needed and with just enough energy while charging the capacitor through an efficient quasi-lossless inductor-based precharger. As result, the proposed energy harvester stores a net energy gain in the battery during every vibration cycle. Two energy-harvesting integrated circuits (IC) were analyzed, designed, developed, and validated using a 0.7-im BiCMOS process and a 30-Hz mechanical variable capacitor. The precharger, harvester, monitoring, and control microelectronics of the first prototype draw sufficient power to operate and at the same time produce experimentally 1.27, 2.14, and 2.87 nJ per vibration cycle for battery voltages at 2.7, 3.5, and 4.2 V, which with 30-Hz vibrations produce 38.1, 64.2, and 86.1 nW. By incorporating into the system a self-tuning loop that adapts optimally the inductor-based precharger to varying battery voltages, the second prototype harnessed and gained 1.93, 2.43, and 3.89 nJ per vibration cycle at battery voltages 2.7, 3.5, and 4.2 V, generating 57.89, 73.02, and 116.55 nW at 30 Hz. The harvester ultimately charges from 2.7 to 4.2 V a 1-muF capacitor (which emulates a small thin-film Li Ion) in approximately 69 s, harnessing in the same length of time 47.9% more energy than with a non-adapting harvester.

  15. Electron lithography STAR design guidelines. Part 3: The mosaic transistor array applied to custom microprocessors. Part 4: Stores logic arrays, SLAs implemented with clocked CMOS

    NASA Technical Reports Server (NTRS)

    Trotter, J. D.

    1982-01-01

    The Mosaic Transistor Array is an extension of the STAR system developed by NASA which has dedicated field cells designed to be specifically used in semicustom microprocessor applications. The Sandia radiation hard bulk CMOS process is utilized in order to satisfy the requirements of space flights. A design philosophy is developed which utilizes the strengths and recognizes the weaknesses of the Sandia process. A style of circuitry is developed which incorporates the low power and high drive capability of CMOS. In addition the density achieved is better than that for classic CMOS, although not as good as for NMOS. The basic logic functions for a data path are designed with compatible interface to the STAR grid system. In this manner either random logic or PLA type structures can be utilized for the control logic.

  16. Manufacture and characterization of high Q-factor inductors based on CMOS-MEMS techniques.

    PubMed

    Yang, Ming-Zhi; Dai, Ching-Liang; Hong, Jin-Yu

    2011-01-01

    A high Q-factor (quality-factor) spiral inductor fabricated by the CMOS (complementary metal oxide semiconductor) process and a post-process was investigated. The spiral inductor is manufactured on a silicon substrate. A post-process is used to remove the underlying silicon substrate in order to reduce the substrate loss and to enhance the Q-factor of the inductor. The post-process adopts RIE (reactive ion etching) to etch the sacrificial oxide layer, and then TMAH (tetramethylammonium hydroxide) is employed to remove the silicon substrate for obtaining the suspended spiral inductor. The advantage of this post-processing method is its compatibility with the CMOS process. The performance of the spiral inductor is measured by an Agilent 8510C network analyzer and a Cascade probe station. Experimental results show that the Q-factor and inductance of the spiral inductor are 15 at 15 GHz and 1.8 nH at 1 GHz, respectively. PMID:22163726

  17. Manufacture and Characterization of High Q-Factor Inductors Based on CMOS-MEMS Techniques

    PubMed Central

    Yang, Ming-Zhi; Dai, Ching-Liang; Hong, Jin-Yu

    2011-01-01

    A high Q-factor (quality-factor) spiral inductor fabricated by the CMOS (complementary metal oxide semiconductor) process and a post-process was investigated. The spiral inductor is manufactured on a silicon substrate. A post-process is used to remove the underlying silicon substrate in order to reduce the substrate loss and to enhance the Q-factor of the inductor. The post-process adopts RIE (reactive ion etching) to etch the sacrificial oxide layer, and then TMAH (tetramethylammonium hydroxide) is employed to remove the silicon substrate for obtaining the suspended spiral inductor. The advantage of this post-processing method is its compatibility with the CMOS process. The performance of the spiral inductor is measured by an Agilent 8510C network analyzer and a Cascade probe station. Experimental results show that the Q-factor and inductance of the spiral inductor are 15 at 15 GHz and 1.8 nH at 1 GHz, respectively. PMID:22163726

  18. Post-CMOS compatible high-throughput fabrication of AlN-based piezoelectric microcantilevers

    NASA Astrophysics Data System (ADS)

    Pérez-Campos, A.; Iriarte, G. F.; Hernando-Garcia, J.; Calle, F.

    2015-02-01

    A post-complementary metal oxide semiconductor (CMOS) compatible microfabrication process of piezoelectric cantilevers has been developed. The fabrication process is suitable for standard silicon technology and provides low-cost and high-throughput manufacturing. This work reports design, fabrication and characterization of piezoelectric cantilevers based on aluminum nitride (AlN) thin films synthesized at room temperature. The proposed microcantilever system is a sandwich structure composed of chromium (Cr) electrodes and a sputtered AlN film. The key issue for cantilever fabrication is the growth at room temperature of the AlN layer by reactive sputtering, making possible the innovative compatibility of piezoelectric MEMS devices with CMOS circuits already processed. AlN and Cr have been etched by inductively coupled plasma (ICP) dry etching using a BCl3-Cl2-Ar plasma chemistry. As part of the novelty of the post-CMOS micromachining process presented here, a silicon Si (1 0 0) wafer has been used as substrate as well as the sacrificial layer used to release the microcantilevers. In order to achieve this, the Si surface underneath the structure has been wet etched using an HNA (hydrofluoric acid + nitric acid + acetic acid) based solution. X-ray diffraction (XRD) characterization indicated the high crystalline quality of the AlN film. An atomic force microscope (AFM) has been used to determine the Cr electrode surface roughness. The morphology of the fabricated devices has been studied by scanning electron microscope (SEM). The cantilevers have been piezoelectrically actuated and their out-of-plane vibration modes were detected by vibrometry.

  19. CMOS APS imaging system application in star tracker

    NASA Astrophysics Data System (ADS)

    Li, Jie; Liu, Jinguo; Li, Xuekui; Liu, Yaxia; Hao, Zhihang

    2005-01-01

    Small satellites are capable of performing space explore missions that require accurate attitude determination and control. However, low weight, size, power and cost requirements limit the types of attitude sensor of small craft, such as CCD, are not practical for small satellites. CMOS APS is a good substitute for attitude sensors of small craft. Some of the technical advantages of CMOS APS are no blooming, single power, low power consumption, small size and little support circuitry, direct digital output, simple to system design, in particular, radiation-hard characteristic compare with CCD. This paper discusses the application probability of CMOS APS in star tracker for small satellites, further more, a prototype ground-based star camera based on STAR250 CMOS image sensor has been built. In order to extract stars positions coordinates, subpixel accuracy centroiding algorithm has been developed and tested on some ground-based images. Moreover, the camera system star sensitivity and noise model are analyzed, and the system accuracy is been evaluated. Experimental results indicate that a star camera based on CMOS APS is a viable practical attitude sensor appropriate for space small satellites.

  20. CMOS Cell Sensors for Point-of-Care Diagnostics

    PubMed Central

    Adiguzel, Yekbun; Kulah, Haluk

    2012-01-01

    The burden of health-care related services in a global era with continuously increasing population and inefficient dissipation of the resources requires effective solutions. From this perspective, point-of-care diagnostics is a demanded field in clinics. It is also necessary both for prompt diagnosis and for providing health services evenly throughout the population, including the rural districts. The requirements can only be fulfilled by technologies whose productivity has already been proven, such as complementary metal-oxide-semiconductors (CMOS). CMOS-based products can enable clinical tests in a fast, simple, safe, and reliable manner, with improved sensitivities. Portability due to diminished sensor dimensions and compactness of the test set-ups, along with low sample and power consumption, is another vital feature. CMOS-based sensors for cell studies have the potential to become essential counterparts of point-of-care diagnostics technologies. Hence, this review attempts to inform on the sensors fabricated with CMOS technology for point-of-care diagnostic studies, with a focus on CMOS image sensors and capacitance sensors for cell studies. PMID:23112587

  1. Integrating silicon photonic interconnects with CMOS: Fabrication to architecture

    NASA Astrophysics Data System (ADS)

    Sherwood, Nicholas Ramsey

    While it was for many years the goal of microelectronics to speed up our daily tasks, the focus of today's technological developments is heavily centered on electronic media. Anyone can share their thoughts as text, sound, images or full videos, they can even make phone calls and download full movies on their computers, tablets and phones. The impact of this upsurge in bandwidth is directly on the infrastructure that carries this data. Long distance telecom lines were long ago replaced by optical fibers; now shorter and shorter distance connections have moved to optical transmission to keep up with the bandwidth requirements. Yet microprocessors that make up the switching nodes as well as the endpoints are not only stagnant in terms of processing speed, but also unlikely to continue Moore's transistor-doubling trend for much longer. Silicon photonics stands to make a technical leap in microprocessor technology by allowing monolithic communication speeds between arbitrarily spaced processing elements. The improvement in on-chip communication could reduce power and enable new improvements in this field. This work explores a few aspects involved in making such a leap practical in real life. The first part of the thesis develops process techniques and materials to make silicon photonics truly compatible with CMOS electronics, for two different stack layouts, including a glimpse into multilayerd photonics. Following this is an evaluation of the limitations of integrated devices and a post-fabrication/stabilizing solution using thermal index shifting. In the last parts we explore higher level device design and architecture on the SOI platform.

  2. Etch challenges for DSA implementation in CMOS via patterning

    NASA Astrophysics Data System (ADS)

    Pimenta Barros, P.; Barnola, S.; Gharbi, A.; Argoud, M.; Servin, I.; Tiron, R.; Chevalier, X.; Navarro, C.; Nicolet, C.; Lapeyre, C.; Monget, C.; Martinez, E.

    2014-03-01

    This paper reports on the etch challenges to overcome for the implementation of PS-b-PMMA block copolymer's Directed Self-Assembly (DSA) in CMOS via patterning level. Our process is based on a graphoepitaxy approach, employing an industrial PS-b-PMMA block copolymer (BCP) from Arkema with a cylindrical morphology. The process consists in the following steps: a) DSA of block copolymers inside guiding patterns, b) PMMA removal, c) brush layer opening and finally d) PS pattern transfer into typical MEOL or BEOL stacks. All results presented here have been performed on the DSA Leti's 300mm pilot line. The first etch challenge to overcome for BCP transfer involves in removing all PMMA selectively to PS block. In our process baseline, an acetic acid treatment is carried out to develop PMMA domains. However, this wet development has shown some limitations in terms of resists compatibility and will not be appropriated for lamellar BCPs. That is why we also investigate the possibility to remove PMMA by only dry etching. In this work the potential of a dry PMMA removal by using CO based chemistries is shown and compared to wet development. The advantages and limitations of each approach are reported. The second crucial step is the etching of brush layer (PS-r-PMMA) through a PS mask. We have optimized this step in order to preserve the PS patterns in terms of CD, holes features and film thickness. Several integrations flow with complex stacks are explored for contact shrinking by DSA. A study of CD uniformity has been addressed to evaluate the capabilities of DSA approach after graphoepitaxy and after etching.

  3. Operation and biasing for single device equivalent to CMOS

    DOEpatents

    Welch, James D. (10328 Pinehurst Ave., Omaha, NE 68124)

    2001-01-01

    Disclosed are semiconductor devices including at least one junction which is rectifying whether the semiconductor is caused to be N or P-type, by the presence of field induced carriers. In particular, inverting and non-inverting gate voltage channel induced semiconductor single devices with operating characteristics similar to conventional multiple device CMOS systems, which can be operated as modulators, are disclosed as are a non-latching SCR and an approach to blocking parasitic currents. Operation of the gate voltage channel induced semiconductor single devices with operating characteristics similar to multiple device CMOS systems under typical bias schemes is described, and simple demonstrative five mask fabrication procedures for the inverting and non-inverting gate voltage channel induced semiconductor single devices with operating characteristics similar to multiple device CMOS systems are also presented.

  4. A hybrid CMOS-microfluidic contact imaging microsystem

    NASA Astrophysics Data System (ADS)

    Singh, Ritu Raj; Leng, Lian; Guenther, Axel; Genov, Roman

    2009-08-01

    A hybrid CMOS/Microfluidic microsystem is presented. The microsystem integrates a soft polymer microfluidic network with a 64x128 pixel imager fabricated in low-cost standard 0.35 micron CMOS technology. The multiple microfluidic channels facilitate in-situ photochemical reactions of analytes and their detection directly on the surface of the CMOS photosensor array. The promixity between the analyte and the photosensor enhances the microsystem sensitivity, thus requiring only microliter volumes of the sample. Circuit techniques such as pixel binning and a two transistor reset path technique are employed to improve the imager sensitivity. The integrated microsystem is validated in on-chip chemiluminescence detection of luminol for the two microfluidic network prototypes designed.

  5. Design of CMOS logic gates for TID radiation

    NASA Astrophysics Data System (ADS)

    Attia, John Okyere; Sasabo, Maria L.

    The rise time, fall time and propagation delay of the logic gates were derived. The effects of total ionizing dose (TID) radiation on the fall and rise times of CMOS logic gates were obtained using C program calculations and PSPICE simulations. The variations of mobility and threshold voltage on MOSFET transistors when subjected to TID radiation were used to determine the dependence of switching times on TID. The results of this work indicate that by increasing the size of P-channel transistor with respect to the N-channel transistors of the CMOS gates, the propagation delay of CMOS logic gate can be made to decrease with, or be independent of an increase in TID radiation.

  6. CMOS Monolithic Active Pixel Sensors (MAPS): Developments and future outlook

    NASA Astrophysics Data System (ADS)

    Turchetta, R.; Fant, A.; Gasiorek, P.; Esbrand, C.; Griffiths, J. A.; Metaxas, M. G.; Royle, G. J.; Speller, R.; Venanzi, C.; van der Stelt, P. F.; Verheij, H.; Li, G.; Theodoridis, S.; Georgiou, H.; Cavouras, D.; Hall, G.; Noy, M.; Jones, J.; Leaver, J.; Machin, D.; Greenwood, S.; Khaleeq, M.; Schulerud, H.; stby, J. M.; Triantis, F.; Asimidis, A.; Bolanakis, D.; Manthos, N.; Longo, R.; Bergamaschi, A.

    2007-12-01

    Re-invented in the early 1990s, on both sides of the Atlantic, Monolithic Active Pixel Sensors (MAPS) in a CMOS technology are today the most sold solid-state imaging devices, overtaking the traditional technology of Charge-Coupled Devices (CCD). The slow uptake of CMOS MAPS started with low-end applications, for example web-cams, and is slowly pervading the high-end applications, for example in prosumer digital cameras. Higher specifications are required for scientific applications: very low noise, high speed, high dynamic range, large format and radiation hardness are some of these requirements. This paper will present a brief overview of the CMOS Image Sensor technology and of the requirements for scientific applications. As an example, a sensor for X-ray imaging will be presented. This sensor was developed within a European FP6 Consortium, intelligent imaging sensors (I-ImaS).

  7. 77 FR 26787 - Certain CMOS Image Sensors and Products Containing Same; Notice of Receipt of Complaint...

    Federal Register 2010, 2011, 2012, 2013, 2014

    2012-05-07

    ... COMMISSION Certain CMOS Image Sensors and Products Containing Same; Notice of Receipt of Complaint... complaint entitled Certain CMOS Image Sensors and Products Containing Same, DN 2895; the Commission is... importation of certain CMOS image sensors and products containing same. The complaint names as...

  8. 1T Pixel Using Floating-Body MOSFET for CMOS Image Sensors

    PubMed Central

    Lu, Guo-Neng; Tournier, Arnaud; Roy, Franois; Deschamps, Benot

    2009-01-01

    We present a single-transistor pixel for CMOS image sensors (CIS). It is a floating-body MOSFET structure, which is used as photo-sensing device and source-follower transistor, and can be controlled to store and evacuate charges. Our investigation into this 1T pixel structure includes modeling to obtain analytical description of conversion gain. Model validation has been done by comparing theoretical predictions and experimental results. On the other hand, the 1T pixel structure has been implemented in different configurations, including rectangular-gate and ring-gate designs, and variations of oxidation parameters for the fabrication process. The pixel characteristics are presented and discussed. PMID:22389592

  9. Application of high pressure deuterium annealing for improving the hot carrier reliability of CMOS transistors

    SciTech Connect

    Lee, J.; Cheng, K.; Chen, Z.; Hess, K.; Lyding, J.W.; Kim, Y.K.; Lee, H.S.; Kim, Y.W.; Suh, K.P.

    2000-05-01

    The authors present the effect of high pressure deuterium annealing on hot carrier reliability improvements of CMOS transistors. High pressure annealing increases the rate of deuterium incorporation at the SiO{sub 2}/Si interface. They have achieved a significant lifetime improvement (90 {times}) from fully processed wafers (four metal layers) with nitride sidewall spacers and SiON cap layers. The improvement was determined by comparing to wafers that were annealed in a conventional hydrogen forming gas anneal. The annealing time to achieve the same level of improvement is also significantly reduced. The increased incorporation of D at high pressure was confirmed by the secondary ion mass spectrometry characterization.

  10. A reticle size CMOS pixel sensor dedicated to the STAR HFT

    NASA Astrophysics Data System (ADS)

    Valin, I.; Hu-Guo, C.; Baudot, J.; Bertolone, G.; Besson, A.; Colledani, C.; Claus, G.; Dorokhov, A.; Dozire, G.; Dulinski, W.; Gelin, M.; Goffe, M.; Himmi, A.; Jaaskelainen, K.; Morel, F.; Pham, H.; Santos, C.; Senyukov, S.; Specht, M.; Voutsinas, G.; Wang, J.; Winter, M.

    2012-01-01

    ULTIMATE is a reticle size CMOS Pixel Sensor (CPS) designed to meet the requirements of the STAR pixel detector (PXL). It includes a pixel array of 928 rows and 960 columns with a 20.7 ?m pixel pitch, providing a sensitive area of ~ 3.8 cm2. Based on the sensor designed for the EUDET beam telescope, the device is a binary output sensor with integrated zero suppression circuitry featuring a 320 Mbps data throughput capability. It was fabricated in a 0.35 ?m OPTO process early in 2011. The design and preliminary test results, including charged particle detection performances measured at the CERN-SPS, are presented.

  11. Multi-purpose CMOS sensor interface for low-power applications

    NASA Astrophysics Data System (ADS)

    Wouters, P.; de Cooman, M.; Puers, R.

    1994-08-01

    A dedicated low-power CMOS transponder microchip is presented as part of a novel telemetry implant for biomedical applications. This mixed analog-digital circuit contains an identification code and collects information on physiological parameters, i.e., body temperature and physical activity, and on the status of the battery. To minimize the amount of data to be transmitted, a dedicated signal processing algorithm is embedded within its circuitry. All telemetry functions (encoding, modulation, generation of the carrier) are implemented on the integrated circuit. Emphasis is on a high degree of flexibility towards sensor inputs and internal data management, extreme miniaturization, and low-power consumption to allow a long implantation lifetime.

  12. A low-power, low-noise neural-signal amplifier circuit in 90-nm CMOS.

    PubMed

    Zarifi, M H; Frounchi, J; Farshchi, S; Judy, J W

    2008-01-01

    A fully-differential low-power low-noise preamplifier for biopotential and neural-recording applications is presented. This design, which has been simulated in a standard 90-nm CMOS process, consumes 30 microW from a 3-V power supply. The simulated integrated input-referred noise is 2.3 microV over 0.1 Hz to 20 kHz. The amplifier also provides an output swing of +/- 0.9 V with a THD of less than 0.1% PMID:19163183

  13. Prototype Active Silicon Sensor in 150 nm HR-CMOS technology for ATLAS Inner Detector Upgrade

    NASA Astrophysics Data System (ADS)

    Rymaszewski, P.; Barbero, M.; Breugnon, P.; Godiot, S.; Gonella, L.; Hemperek, T.; Hirono, T.; Hügging, F.; Krüger, H.; Liu, J.; Pangaud, P.; Peric, I.; Rozanov, A.; Wang, A.; Wermes, N.

    2016-02-01

    The LHC Phase-II upgrade will lead to a significant increase in luminosity, which in turn will bring new challenges for the operation of inner tracking detectors. A possible solution is to use active silicon sensors, taking advantage of commercial CMOS technologies. Currently ATLAS R&D programme is qualifying a few commercial technologies in terms of suitability for this task. In this paper a prototype designed in one of them (LFoundry 150 nm process) will be discussed. The chip architecture will be described, including different pixel types incorporated into the design, followed by simulation and measurement results.

  14. CMOS front-end for duobinary data over 50-m SI-POF links

    NASA Astrophysics Data System (ADS)

    Aguirre, J.; Guerrero, E.; Gimeno, C.; Snchez-Azqueta, C.; Celma, S.

    2015-06-01

    This paper presents a front-end for short-reach high-speed optical communications that compensates the limited bandwidth of 1-mm 50-m step-index plastic optical fiber (SI-POF). For that purpose, it combines two techniques: continuous-time equalization and duobinary modulation. An addition of both enables the receiver to operate at 3.125 Gbps. The prototype contains a transimpedance amplifier, a continuous-time equalizer and a duobinary decoder. The prototype has been implemented in a cost-effective 0.18-?m CMOS process and is fed with 1.8 V.

  15. A 65 nm CMOS LNA for Bolometer Application

    NASA Astrophysics Data System (ADS)

    Huang, Tom Nan; Boon, Chirn Chye; Zhu, Forest Xi; Yi, Xiang; He, Xiaofeng; Feng, Guangyin; Lim, Wei Meng; Liu, Bei

    2016-04-01

    Modern bolometers generally consist of large-scale arrays of detectors. Implemented in conventional technologies, such bolometer arrays suffer from integrability and productivity issues. Recently, the development of CMOS technologies has presented an opportunity for the massive production of high-performance and highly integrated bolometers. This paper presents a 65-nm CMOS LNA designed for a millimeter-wave bolometer's pre-amplification stage. By properly applying some positive feedback, the noise figure of the proposed LNA is minimized at under 6 dB and the bandwidth is extended to 30 GHz.

  16. Modifications in CMOS Dynamic Logic Style: A Review Paper

    NASA Astrophysics Data System (ADS)

    Meher, Preetisudha; Mahapatra, Kamalakanta

    2015-12-01

    Dynamic logic style is used in high performance circuit design because of its fast speed and less transistors requirement as compared to CMOS logic style. But it is not widely accepted for all types of circuit implementations due to its less noise tolerance and charge sharing problems. A small noise at the input of the dynamic logic can change the desired output. Domino logic uses one static CMOS inverter at the output of dynamic node which is more noise immune and consuming very less power as compared to other proposed circuit. In this paper, an overview and classification of these techniques are first presented and then compared according to their performance.

  17. CMOS 6-T SRAM cell design subject to ``atomistic'' fluctuations

    NASA Astrophysics Data System (ADS)

    Cheng, B.; Roy, S.; Asenov, A.

    2007-04-01

    Intrinsic parameter fluctuations adversely affect SRAM cell stability, and will become one of the major factors limiting future CMOS 6-T SRAM scaling. In this work, using the driveability ratio and cell ratio parameters, and employing 'Write Assist' technology, we present a compromise design methodology which can balance WNM and SNM performance, improving CMOS 6-T SRAM scalability in the decananometer regime. The feasibility of the approach is demonstrated through detailed statistical SRAM simulations using models calibrated against MOSFETs with physical gate length of 35 nm.

  18. Large Format CMOS-based Detectors for Diffraction Studies

    NASA Astrophysics Data System (ADS)

    Thompson, A. C.; Nix, J. C.; Achterkirchen, T. G.; Westbrook, E. M.

    2013-03-01

    Complementary Metal Oxide Semiconductor (CMOS) devices are rapidly replacing CCD devices in many commercial and medical applications. Recent developments in CMOS fabrication have improved their radiation hardness, device linearity, readout noise and thermal noise, making them suitable for x-ray crystallography detectors. Large-format (e.g. 10 cm 15 cm) CMOS devices with a pixel size of 100 ?m 100 ?m are now becoming available that can be butted together on three sides so that very large area detector can be made with no dead regions. Like CCD systems our CMOS systems use a GdOS:Tb scintillator plate to convert stopping x-rays into visible light which is then transferred with a fiber-optic plate to the sensitive surface of the CMOS sensor. The amount of light per x-ray on the sensor is much higher in the CMOS system than a CCD system because the fiber optic plate is only 3 mm thick while on a CCD system it is highly tapered and much longer. A CMOS sensor is an active pixel matrix such that every pixel is controlled and readout independently of all other pixels. This allows these devices to be readout while the sensor is collecting charge in all the other pixels. For x-ray diffraction detectors this is a major advantage since image frames can be collected continuously at up 20 Hz while the crystal is rotated. A complete diffraction dataset can be collected over five times faster than with CCD systems with lower radiation exposure to the crystal. In addition, since the data is taken fine-phi slice mode the 3D angular position of diffraction peaks is improved. We have developed a cooled 6 sensor CMOS detector with an active area of 28.2 29.5 cm with 100 ?m 100 ?m pixels and a readout rate of 20 Hz. The detective quantum efficiency exceeds 60% over the range 8-12 keV. One, two and twelve sensor systems are also being developed for a variety of scientific applications. Since the sensors are butt able on three sides, even larger systems could be built at reasonable cost.

  19. A 65 nm CMOS LNA for Bolometer Application

    NASA Astrophysics Data System (ADS)

    Huang, Tom Nan; Boon, Chirn Chye; Zhu, Forest Xi; Yi, Xiang; He, Xiaofeng; Feng, Guangyin; Lim, Wei Meng; Liu, Bei

    2016-01-01

    Modern bolometers generally consist of large-scale arrays of detectors. Implemented in conventional technologies, such bolometer arrays suffer from integrability and productivity issues. Recently, the development of CMOS technologies has presented an opportunity for the massive production of high-performance and highly integrated bolometers. This paper presents a 65-nm CMOS LNA designed for a millimeter-wave bolometer's pre-amplification stage. By properly applying some positive feedback, the noise figure of the proposed LNA is minimized at under 6 dB and the bandwidth is extended to 30 GHz.

  20. Ultralow-power operational amplifier CMOS chip for monolithic integration with neural microprobes

    NASA Astrophysics Data System (ADS)

    Zhang, Chuang; Xin, Tinghui; Srivastava, Ashok; Ajmera, Pratul K.

    2003-07-01

    A CMOS test chip has been designed and fabricated which can monolithically integrate ultra low-power operational amplifiers with neural microprobes through post-IC processing. Neural microprobes of varying widths (70 ?m, 60 ?m, 50 ?m, and 40 ?m) are designed with varying center-to-center spacing (195 ?m, 175 ?m, 165 ?m, 155 ?m, 145 ?m, and 125 ?m) on a test chip for integration. Neural microprobes are first fabricated on a separate Si substrate to develop a fabrication process for post-IC processing for integration. The amplifier is designed in standard 1.5 ?m CMOS process for operation at -/+ 0.4 V. Low power performance is realized by combining forward biased source-substrate junction MOSFETs with a novel low-voltage level-shift current mirror. The designed amplifier gives a gain of 7000 (77 dB) and a 3-dB bandwidth of 30 kHz. The amplifier output has a positive offset of only 20 ?V and power dissipation of only 40 ?W.

  1. Depleted Monolithic Active Pixel Sensors (DMAPS) implemented in LF-150 nm CMOS technology

    NASA Astrophysics Data System (ADS)

    Kishishita, T.; Hemperek, T.; Krüger, H.; Wermes, N.

    2015-03-01

    We present the recent development of Depleted Monolithic Active Pixel Sensors (DMAPS), implemented with an LFoundry (LF) 150 nm CMOS process. MAPS detectors based on an epi-layer have been matured in recent years and have attractive features in terms of reducing material budget and handling cost compared to conventional hybrid pixel detectors. However, the obtained signal is relatively small (~1000 e-) due to the thin epi-layer, and charge collection time is relatively slow, e.g., in the order of 100 ns, because charges are mainly collected by diffusion. Modern commercial CMOS technology, however, offers advanced process options to overcome such difficulties and enable truly monolithic devices as an alternative to hybrid pixel sensors and charge coupled devices. Unlike in the case of the standard MAPS technologies with epi-layers, the LF process provides a high-resistivity substrate that enables large signal and fast charge collection by drift in a ~50 μm thick depleted layer. Since this process also enables the use of deep n- and p-wells to isolate the collection electrode from the thin active device layer, PMOS and NMOS transistors are available for the readout electronics in each pixel cell. In order to evaluate the sensor and transistor characteristics, several collection electrodes variants and readout architectures have been implemented. In this report, we focus on its design aspect of the LF-DMAPS prototype chip.

  2. A temperature-resistant wide-dynamic-range CMOS image sensor

    NASA Astrophysics Data System (ADS)

    Mizobuchi, Koichi; Adachi, Satoru; Yamashita, Tomokazu; Okamura, Seiichiro; Oshikubo, Hiromichi; Akahane, Nana; Sugawa, Shigetoshi

    2007-02-01

    A temperature resistant wide dynamic range (WDR) CMOS image sensor has been developed using the very low dark current front-end of line (VLDC FEOL) and the metal hermetic seal ceramic leadless chip carrier (CLCC) package suppressing the degradation of the spectra response of the on-chip micro lens and color filter (OCML/OCCF). A 1/4 inch VGA 5.6 ?m pixel pitch WDR CMOS image sensor has been fabricated through 0.18 ?m 2P3M process with the VLDC FEOL which contains the pinned photodiode with less electrical fields, the less plasma etching damages, the transfer gate with the suppressed current at Si-SiO II interface and the furnace temperature process for the re-crystallization. The sensor chips with the conventional OCML/OCCF assembled into the metal hermetic seal package by the low residual oxygen vacuum welding machine has finally received the thermal stress test (150 deg.C/500 hours). The dark current is 350 pA/cm2 at 85 deg.C (50 pA/cm2 at 60 deg.C). No degradation of the spectra response in any of R/G/B pixels is observed after the thermal stress test. It is found that the thermal decomposition of the OCML/OCCF (phenol resin) is not caused easily in nitrogen with the low residual oxygen concentration. The sample images captured by the WDR CMOS image sensor assembled camera keep good quality up to 85 deg.C.

  3. CMOS active pixel sensor with a chess-pattern pixel layout

    NASA Astrophysics Data System (ADS)

    Bloss, Hans S.; Gick, Stephan K.; Schmoelz, Sybille C.; Foettinger, Gunther

    2001-05-01

    Pixels in an area image sensor are normally arranged in a regular matrix, because this is the best way for sensor layout, display and image processing. Image sensors in CMOS aps technologies offer great flexibility in the design. Nearly any shape for the light-sensitive photodiode and any arrangements are possible. But one disadvantage of CMOS aps is, that they need some space in the sensitive area for the electronic pixel circuitry. We developed and investigated a CMOS sensor with a chessboard like pixel pattern, where the white fields are the sensitive photodiodes and the black fields are for electronic circuitry. The black fields must be interpolated for displaying. So we get an image with a double number of pixels, which is again a regular matrix of pixels which can be displayed on a monitor and is suited for standard image processing. We compared such a chess-pattern sensor with regular matrix image sensors. For this we made some computer simulations of these variations regarding the number of pixels and the optical fill factor. The performance of the images is evaluated concerning technical data, like line-resolution, SFR, artifacts and the visual impression as well. We show simulations with real images of the same scene: Two simulations are with a normal regular pixel arrangement and the other with a sensor having a chess pattern pixel arrangement. Sensor with chess-pattern pixel arrangement can be sued in video-, industrial- and still picture-cameras for black and white and color imaging. It will result in a improved image quality compared to regular matrix sensors.

  4. Fabrication and functional demonstration of a smart electrode with a built-in CMOS microchip for neural stimulation of a retinal prosthesis.

    PubMed

    Noda, Toshihiko; Fujisawa, Takumi; Kawasaki, Ryohei; Tashiro, Hiroyuki; Takehara, Hiroaki; Sasagawa, Kiyotaka; Tokuda, Takashi; Ohta, Jun

    2015-08-01

    In this study, we propose an advanced architecture of a smart electrode for neural stimulation of a retinal prosthesis. A feature of the proposed architecture is embedding CMOS microchips into the core of the stimulus electrodes. Microchip integration without dead space on the array is possible. Additionally, higher durability can be expected because the microchips are protected by the stimulus electrodes like a metal casing. Dedicated circular-shaped CMOS microchips were designed and fabricated. The microchip measured 400 ?m in diameter. Stimulus electrodes that had a microcavity for embedding the microchip were also fabricated. In the assembly process, the CMOS microchip was mounted on a flexible substrate, and then the stimulus electrode was mounted to cover the microchip. The microchip was completely built into the inside of the electrode. By performing an ex-vivo experiment using the extracted eyeball of a pig, stimulus function of the electrode was demonstrated successfully. PMID:26737011

  5. Total dose and dose rate radiation characterization of EPI-CMOS radiation hardened memory and microprocessor devices

    SciTech Connect

    Gingerich, B.L.; Hermsen, J.M.; Lee, J.C.; Schroeder, J.E.

    1984-12-01

    The process, circuit discription, and total dose radiation characteristics are presented for two second generation hardened 4K EPI-CMOS RAMs and a first generation 80C85 microprocessor. Total dose radiation performance is presented to 10M rad-Si and effects of biasing and operating conditions are discussed. The dose rate sensitivity of the 4K RAMs is also presented along with single event upset (SEU) test data.

  6. Materials issues in the integration of magnetic structures on CMOS-MEMS

    NASA Astrophysics Data System (ADS)

    Min, Seungook

    A MEMS-based data storage is being developed at CMU for low power, high access speed and low cost. Multi magnetic heads and their actuators are proposed to be fabricated on top of CMOS and to be released with proper masking. We describe the development of a magnetic head process integrated with a CMOS-MEMS process for actuator fabrication. Process integration depends on an understanding of the structure-process-properties relationship of many different processes. Several materials problems were encountered and solved in the course of the process development. The experiment work and rationale for particular choices is discussed. Low stress (<25 MPa), magnetically soft films of permalloy (Ni 80Fe20) were deposited for a MEMS-based data storage application without significant plasma-induced substrate heating. Optimization of film properties was performed using a designed experiment, response surface methodology. The relationship between the results of the factorial experiment is explained based on Murayama's stripe domain theory. The properties of AMR sensors fabricated on structures released by the CMOS post process are characterized. The AMR sensor on the released MEMS structure functions properly and the MR head shows 0.4% MR change. According to our analysis of the required MR properties and its specification, the characteristics of TMR sensor, high intensity signal and low power consumption, well satisfy the requirement of MEMS-based data storage system. A TMR sensor has been built on our yoke type head. We have investigated the planarized surface with AFM for higher accuracy. The polishing mechanisms for oxide and permalloy are studied based on the materials corrosion theory using Pourbaix diagram. In addition, the uniformity of wafer and a cleaning process as a post CMP process were also studied. For simple fabrication processes, a photoresist layer was used as a side wall insulation which reduces process steps such as oxide or nitride deposition, lift-off and/or other additional etching processes. The sensor shows good tunneling I-V characteristics without shunting but it doesn't respond to the magnetic field. It is believed that the over oxidation would oxides the bottom electrode, permalloy, that ruins spin-preserved tunneling.

  7. Enhancing the far-UV sensitivity of silicon CMOS imaging arrays

    NASA Astrophysics Data System (ADS)

    Retherford, K. D.; Bai, Yibin; Ryu, Kevin K.; Gregory, J. A.; Welander, Paul B.; Davis, Michael W.; Greathouse, Thomas K.; Winter, Gregory S.; Suntharalingam, Vyshnavi; Beletic, James W.

    2014-07-01

    We report our progress toward optimizing backside-illuminated silicon PIN CMOS devices developed by Teledyne Imaging Sensors (TIS) for far-UV planetary science applications. This project was motivated by initial measurements at Southwest Research Institute (SwRI) of the far-UV responsivity of backside-illuminated silicon PIN photodiode test structures described in Bai et al., SPIE, 2008, which revealed a promising QE in the 100-200 nm range as reported in Davis et al., SPIE, 2012. Our effort to advance the capabilities of thinned silicon wafers capitalizes on recent innovations in molecular beam epitaxy (MBE) doping processes. Key achievements to date include: 1) Representative silicon test wafers were fabricated by TIS, and set up for MBE processing at MIT Lincoln Laboratory (LL); 2) Preliminary far-UV detector QE simulation runs were completed to aid MBE layer design; 3) Detector fabrication was completed through the pre-MBE step; and 4) Initial testing of the MBE doping process was performed on monitoring wafers, with detailed quality assessments. Early results suggest that potential challenges in optimizing the UV-sensitivity of silicon PIN type CMOS devices, compared with similar UV enhancement methods established for CCDs, have been mitigated through our newly developed methods. We will discuss the potential advantages of our approach and briefly describe future development steps.

  8. Bioinspired architecture approach for a one-billion transistor smart CMOS camera chip

    NASA Astrophysics Data System (ADS)

    Fey, Dietmar; Komann, Marcus

    2007-05-01

    In the paper we present a massively parallel VLSI architecture for future smart CMOS camera chips with up to one billion transistors. To exploit efficiently the potential offered by future micro- or nanoelectronic devices traditional on central structures oriented parallel architectures based on MIMD or SIMD approaches will fail. They require too long and too many global interconnects for the distribution of code or the access to common memory. On the other hand nature developed self-organising and emergent principles to manage successfully complex structures based on lots of interacting simple elements. Therefore we developed a new as Marching Pixels denoted emergent computing paradigm based on a mixture of bio-inspired computing models like cellular automaton and artificial ants. In the paper we present different Marching Pixels algorithms and the corresponding VLSI array architecture. A detailed synthesis result for a 0.18 ?m CMOS process shows that a 256256 pixel image is processed in less than 10 ms assuming a moderate 100 MHz clock rate for the processor array. Future higher integration densities and a 3D chip stacking technology will allow the integration and processing of Mega pixels within the same time since our architecture is fully scalable.

  9. First measurement of the in-pixel electron multiplying with a standard imaging CMOS technology: Study of the EMCMOS concept

    NASA Astrophysics Data System (ADS)

    Brugire, Timothe; Mayer, Frderic; Fereyre, Pierre; Gurin, Cyrille; Dominjon, Agns; Barbier, Rmi

    2015-07-01

    Scientific low light imaging devices benefit today from designs for pushing the mean noise to the single electron level. When readout noise reduction reaches its limit, signal-to-noise ratio improvement can be driven by an electron multiplication process, driven by impact ionization, before adding the readout noises. This concept already implemented in CCD structures using extra-pixel shift registers can today be integrated inside each pixel in CMOS technology. The EBCMOS group at IPNL is in charge of the characterization of new prototypes developed by E2V using this concept: the electron multiplying CMOS (EMCMOS). The CMOS technology enables electron multiplication inside the photodiode itself, and thus, an overlap of the charge integration and multiplication. A new modeling has been developed to describe the output signal mean and variance after the impact ionization process in such a case. In this paper the feasibility of impact ionization process inside a 8 ?m-pitch pixel is demonstrated. The new modeling is also validated by data and a value of 0.32% is obtained for the impact ionization parameter ? with an electric field intensity of 24 V / ?m.

  10. Area- and energy-efficient CORDIC accelerators in deep sub-micron CMOS technologies

    NASA Astrophysics Data System (ADS)

    Vishnoi, U.; Noll, T. G.

    2012-09-01

    The COordinate Rotate DIgital Computer (CORDIC) algorithm is a well known versatile approach and is widely applied in today's SoCs for especially but not restricted to digital communications. Dedicated CORDIC blocks can be implemented in deep sub-micron CMOS technologies at very low area and energy costs and are attractive to be used as hardware accelerators for Application Specific Instruction Processors (ASIPs). Thereby, overcoming the well known energy vs. flexibility conflict. Optimizing Global Navigation Satellite System (GNSS) receivers to reduce the hardware complexity is an important research topic at present. In such receivers CORDIC accelerators can be used for digital baseband processing (fixed-point) and in Position-Velocity-Time estimation (floating-point). A micro architecture well suited to such applications is presented. This architecture is parameterized according to the wordlengths as well as the number of iterations and can be easily extended for floating point data format. Moreover, area can be traded for throughput by partially or even fully unrolling the iterations, whereby the degree of pipelining is organized with one CORDIC iteration per cycle. From the architectural description, the macro layout can be generated fully automatically using an in-house datapath generator tool. Since the adders and shifters play an important role in optimizing the CORDIC block, they must be carefully optimized for high area and energy efficiency in the underlying technology. So, for this purpose carry-select adders and logarithmic shifters have been chosen. Device dimensioning was automatically optimized with respect to dynamic and static power, area and performance using the in-house tool. The fully sequential CORDIC block for fixed-point digital baseband processing features a wordlength of 16 bits, requires 5232 transistors, which is implemented in a 40-nm CMOS technology and occupies a silicon area of 1560 ?m2 only. Maximum clock frequency from circuit simulation of extracted netlist is 768 MHz under typical, and 463 MHz under worst case technology and application corner conditions, respectively. Simulated dynamic power dissipation is 0.24 uW MHz-1 at 0.9 V; static power is 38 uW in slow corner, 65 uW in typical corner and 518 uW in fast corner, respectively. The latter can be reduced by 43% in a 40-nm CMOS technology using 0.5 V reverse-backbias. These features are compared with the results from different design styles as well as with an implementation in 28-nm CMOS technology. It is interesting that in the latter case area scales as expected, but worst case performance and energy do not scale well anymore.

  11. Integrated CMOS dew point sensors for relative humidity measurement

    NASA Astrophysics Data System (ADS)

    Savalli, Nicolo; Baglio, Salvatore; Castorina, Salvatore; Sacco, Vincenzo; Tringali, Cristina

    2004-07-01

    This work deals with the development of integrated relative humidity dew point sensors realized by adopting standard CMOS technology for applications in various fields. The proposed system is composed by a suspended plate that is cooled by exploiting integrated Peltier cells. The cold junctions of the cells have been spread over the plate surface to improve the homogeneity of the temperature distribution over its surface, where cooling will cause the water condensation. The temperature at which water drops occur, named dew point temperature, is a function of the air humidity. Measurement of such dew point temperature and the ambient temperature allows to know the relative humidity. The detection of water drops is achieved by adopting a capacitive sensing strategy realized by interdigited fixed combs, composed by the upper layer of the adopted process. Such a capacitive sensor, together with its conditioning circuit, drives a trigger that stops the cooling of the plate and enables the reading of the dew point temperature. Temperature measurements are achieved by means of suitably integrated thermocouples. The analytical model of the proposed system has been developed and has been used to design a prototype device and to estimate its performances. In such a prototype, the thermoelectric cooler is composed by 56 Peltier cells, made by metal 1/poly 1 junctions. The plate has a square shape with 200 ?m side, and it is realized by exploiting the oxide layers. Starting from the ambient temperature a temperature variation of ?T = 15 K can be reached in 10 ms thus allowing to measure a relative humidity greater than 40%.

  12. Distinct development patterns of c-mos protooncogene expression in female and male mouse germ cells

    SciTech Connect

    Mutter, G.L.; Wolgemuth, D.J.

    1987-08-01

    The protooncogene c-mos is expressed in murine reproductive tissues, producing transcripts of 1.7 and 1.4 kilobases in testis and ovary, respectively. In situ hybridization analysis of c-mos expression in histological sections of mouse ovaries revealed that oocytes are the predominant if not exclusive source of c-mos transcripts. /sup 35/S- or /sup 32/P-labelled RNA probes were transcribed. c-mos transcripts accumulate in growing oocytes, increasing 40- to 90-fold during oocyte and follicular development. c-mos transcripts were also detected in male germ cells and are most abundant after the cells have entered the haploid stage of spermatogenesis. This developmentally regulated pattern of c-mos expression in oocytes and spermatogenic cells suggest that the c-mos gene product may have a function in normal germ-cell differentiation or early embryogenesis.

  13. Characterisation of a CMOS charge transfer device for TDI imaging

    NASA Astrophysics Data System (ADS)

    Rushton, J.; Holland, A.; Stefanov, K.; Mayer, F.

    2015-03-01

    The performance of a prototype true charge transfer imaging sensor in CMOS is investigated. The finished device is destined for use in TDI applications, especially Earth-observation, and to this end radiation tolerance must be investigated. Before this, complete characterisation is required. This work starts by looking at charge transfer inefficiency and then investigates responsivity using mean-variance techniques.

  14. CMOS Ultra Low Power Radiation Tolerant (CULPRiT) Microelectronics

    NASA Technical Reports Server (NTRS)

    Yeh, Penshu; Maki, Gary

    2007-01-01

    Space Electronics needs Radiation Tolerance or hardness to withstand the harsh space environment: high-energy particles can change the state of the electronics or puncture transistors making them disfunctional. This viewgraph document reviews the use of CMOS Ultra Low Power Radiation Tolerant circuits for NASA's electronic requirements.

  15. Mechanically Flexible and High-Performance CMOS Logic Circuits

    PubMed Central

    Honda, Wataru; Arie, Takayuki; Akita, Seiji; Takei, Kuniharu

    2015-01-01

    Low-power flexible logic circuits are key components required by the next generation of flexible electronic devices. For stable device operation, such components require a high degree of mechanical flexibility and reliability. Here, the mechanical properties of low-power flexible complementary metal–oxide–semiconductor (CMOS) logic circuits including inverter, NAND, and NOR are investigated. To fabricate CMOS circuits on flexible polyimide substrates, carbon nanotube (CNT) network films are used for p-type transistors, whereas amorphous InGaZnO films are used for the n-type transistors. The power consumption and voltage gain of CMOS inverters are <500 pW/mm at Vin = 0 V (<7.5 nW/mm at Vin = 5 V) and >45, respectively. Importantly, bending of the substrate is not found to cause significant changes in the device characteristics. This is also observed to be the case for more complex flexible NAND and NOR logic circuits for bending states with a curvature radius of 2.6 mm. The mechanical stability of these CMOS logic circuits makes them ideal candidates for use in flexible integrated devices. PMID:26459882

  16. Mechanically Flexible and High-Performance CMOS Logic Circuits.

    PubMed

    Honda, Wataru; Arie, Takayuki; Akita, Seiji; Takei, Kuniharu

    2015-01-01

    Low-power flexible logic circuits are key components required by the next generation of flexible electronic devices. For stable device operation, such components require a high degree of mechanical flexibility and reliability. Here, the mechanical properties of low-power flexible complementary metal-oxide-semiconductor (CMOS) logic circuits including inverter, NAND, and NOR are investigated. To fabricate CMOS circuits on flexible polyimide substrates, carbon nanotube (CNT) network films are used for p-type transistors, whereas amorphous InGaZnO films are used for the n-type transistors. The power consumption and voltage gain of CMOS inverters are <500 pW/mm at Vin = 0 V (<7.5 nW/mm at Vin = 5 V) and >45, respectively. Importantly, bending of the substrate is not found to cause significant changes in the device characteristics. This is also observed to be the case for more complex flexible NAND and NOR logic circuits for bending states with a curvature radius of 2.6 mm. The mechanical stability of these CMOS logic circuits makes them ideal candidates for use in flexible integrated devices. PMID:26459882

  17. Mechanically Flexible and High-Performance CMOS Logic Circuits

    NASA Astrophysics Data System (ADS)

    Honda, Wataru; Arie, Takayuki; Akita, Seiji; Takei, Kuniharu

    2015-10-01

    Low-power flexible logic circuits are key components required by the next generation of flexible electronic devices. For stable device operation, such components require a high degree of mechanical flexibility and reliability. Here, the mechanical properties of low-power flexible complementary metal-oxide-semiconductor (CMOS) logic circuits including inverter, NAND, and NOR are investigated. To fabricate CMOS circuits on flexible polyimide substrates, carbon nanotube (CNT) network films are used for p-type transistors, whereas amorphous InGaZnO films are used for the n-type transistors. The power consumption and voltage gain of CMOS inverters are <500 pW/mm at Vin = 0 V (<7.5 nW/mm at Vin = 5 V) and >45, respectively. Importantly, bending of the substrate is not found to cause significant changes in the device characteristics. This is also observed to be the case for more complex flexible NAND and NOR logic circuits for bending states with a curvature radius of 2.6 mm. The mechanical stability of these CMOS logic circuits makes them ideal candidates for use in flexible integrated devices.

  18. Upper-Bound Estimates Of SEU in CMOS

    NASA Technical Reports Server (NTRS)

    Edmonds, Larry D.

    1990-01-01

    Theory of single-event upsets (SEU) (changes in logic state caused by energetic charged subatomic particles) in complementary metal oxide/semiconductor (CMOS) logic devices extended to provide upper-bound estimates of rates of SEU when limited experimental information available and configuration and dimensions of SEU-sensitive regions of devices unknown. Based partly on chord-length-distribution method.

  19. CCD AND PIN-CMOS DEVELOPMENTS FOR LARGE OPTICAL TELESCOPE.

    SciTech Connect

    RADEKA, V.

    2006-04-03

    Higher quantum efficiency in near-IR, narrower point spread function and higher readout speed than with conventional sensors have been receiving increased emphasis in the development of CCDs and silicon PIN-CMOS sensors for use in large optical telescopes. Some key aspects in the development of such devices are reviewed.

  20. Effects Of Dose Rates On Radiation Damage In CMOS Parts

    NASA Technical Reports Server (NTRS)

    Goben, Charles A.; Coss, James R.; Price, William E.

    1990-01-01

    Report describes measurements of effects of ionizing-radiation dose rate on consequent damage to complementary metal oxide/semiconductor (CMOS) electronic devices. Depending on irradiation time and degree of annealing, survivability of devices in outer space, or after explosion of nuclear weapons, enhanced. Annealing involving recovery beyond pre-irradiation conditions (rebound) detrimental. Damage more severe at lower dose rates.

  1. Integrated imaging sensor systems with CMOS active pixel sensor technology

    NASA Technical Reports Server (NTRS)

    Yang, G.; Cunningham, T.; Ortiz, M.; Heynssens, J.; Sun, C.; Hancock, B.; Seshadri, S.; Wrigley, C.; McCarty, K.; Pain, B.

    2002-01-01

    This paper discusses common approaches to CMOS APS technology, as well as specific results on the five-wire programmable digital camera-on-a-chip developed at JPL. The paper also reports recent research in the design, operation, and performance of APS imagers for several imager applications.

  2. CMOS VLSI Layout and Verification of a SIMD Computer

    NASA Technical Reports Server (NTRS)

    Zheng, Jianqing

    1996-01-01

    A CMOS VLSI layout and verification of a 3 x 3 processor parallel computer has been completed. The layout was done using the MAGIC tool and the verification using HSPICE. Suggestions for expanding the computer into a million processor network are presented. Many problems that might be encountered when implementing a massively parallel computer are discussed.

  3. Low light level CMOS sensor for night vision systems

    NASA Astrophysics Data System (ADS)

    Gross, Elad; Ginat, Ran; Nesher, Ofer

    2015-05-01

    For many years image intensifier tubes were used for night vision systems. In 2014, Elbit systems developed a digital low-light level CMOS sensor, with similar sensitivity to a Gen II image-intensifiers, down to starlight conditions. In this work we describe: the basic principle behind this sensor, physical model for low-light performance estimation and results of field testing.

  4. CMOS Active-Pixel Image Sensor With Simple Floating Gates

    NASA Technical Reports Server (NTRS)

    Fossum, Eric R.; Nakamura, Junichi; Kemeny, Sabrina E.

    1996-01-01

    Experimental complementary metal-oxide/semiconductor (CMOS) active-pixel image sensor integrated circuit features simple floating-gate structure, with metal-oxide/semiconductor field-effect transistor (MOSFET) as active circuit element in each pixel. Provides flexibility of readout modes, no kTC noise, and relatively simple structure suitable for high-density arrays. Features desirable for "smart sensor" applications.

  5. A High Temperature SOI CMOS NO2 Sensor

    NASA Astrophysics Data System (ADS)

    Ali, S. Z.; Ho, W. O.; Chowdhury, M. F.; Covington, J. A.; Moseley, P.; Saffell, J.; Gardner, J. W.; Udrea, F.

    2011-09-01

    For more than 20 years researchers have been interested in developing micro-gas sensors based on silicon technology. Most of the reported devices are based on micro-hotplates, however they use materials that are not CMOS compatible, and therefore are not suitable for large volume manufacturing. Furthermore, they do not allow the circuitry to be integrated on to the chip. CMOS compatible devices have been previously reported. However, these use polysilicon as the heater material, which has long term stability problems at high temperatures. Here we present low power, low cost SOI CMOS NO2 sensors, based on high stability single crystal silicon P+ micro-heaters platforms, capable of measuring gas concentrations down to 0.1 ppm. We have integrated a thin tungsten molybdenum oxide layer as a sensing material with a foundry-standard SOI CMOS micro-hotplate and tested this to NO2. We believe these devices have the potential for use as robust, very low power consumption, low cost gas sensors.

  6. CMOS image sensors as an efficient platform for glucose monitoring.

    PubMed

    Devadhasan, Jasmine Pramila; Kim, Sanghyo; Choi, Cheol Soo

    2013-10-01

    Complementary metal oxide semiconductor (CMOS) image sensors have been used previously in the analysis of biological samples. In the present study, a CMOS image sensor was used to monitor the concentration of oxidized mouse plasma glucose (86-322 mg dL(-1)) based on photon count variation. Measurement of the concentration of oxidized glucose was dependent on changes in color intensity; color intensity increased with increasing glucose concentration. The high color density of glucose highly prevented photons from passing through the polydimethylsiloxane (PDMS) chip, which suggests that the photon count was altered by color intensity. Photons were detected by a photodiode in the CMOS image sensor and converted to digital numbers by an analog to digital converter (ADC). Additionally, UV-spectral analysis and time-dependent photon analysis proved the efficiency of the detection system. This simple, effective, and consistent method for glucose measurement shows that CMOS image sensors are efficient devices for monitoring glucose in point-of-care applications. PMID:23900281

  7. High speed CMOS/SOS standard cell notebook

    NASA Technical Reports Server (NTRS)

    1978-01-01

    The NASA/MSFC high speed CMOS/SOS standard cell family, designed to be compatible with the PR2D (Place, Route in 2-Dimensions) automatic layout program, is described. Standard cell data sheets show the logic diagram, the schematic, the truth table, and propagation delays for each logic cell.

  8. Single Event Upset Behavior of CMOS Static RAM Cells

    NASA Technical Reports Server (NTRS)

    Lieneweg, Udo; Jeppson, Kjell O.; Buehler, Martin G.

    1993-01-01

    An improved state-space analysis of the CMOS static RAM cell is presented. Introducing theconcept of the dividing line, the critical charge for heavy-ion-induced upset of memory cells can becalculated considering symmetrical as well as asymmetrical capacitive loads. From the criticalcharge, the upset-rate per bit-day for static RAMs can be estimated.

  9. Development of CMOS-MEMS in-plane magnetic coils for application as a three-axis resonant magnetic sensor

    NASA Astrophysics Data System (ADS)

    Chang, Chun-I.; Tsai, Ming-Han; Sun, Chih-Ming; Fang, Weileun

    2014-03-01

    This study designs and implements a single unit three-axis magnetic sensor using the standard TSMC 0.35 m 2P4M CMOS process. The magnetic sensor consists of springs, a proof-mass with embedded magnetic coils, and sensing electrodes. Two sets of in-plane magnetic coils respectively arranged in two orthogonal axes are realized using the stacking of metal and tungsten layers in the CMOS process. The number of turns for the proposed in-plane magnetic-coil is not restricted by the space and thin film layers of the CMOS process. The magnetic coils could respectively generate Lorentz and electromagnetic forces by out-of-plane and in-plane magnetic fields to excite the spring-mass structure. Capacitance sensing electrodes could detect the dynamic response of the spring-mass structure to determine the magnetic fields. Measurements indicate the typical sensitivities of the sensor are 0.21 V T-1 (x-axis), 0.20 V T-1 (y-axis), and 0.90 V T-1 (z-axis) at 1 atm. Moreover, the resolutions of the sensor are respectively 384 nT rtHz-1 for the x-axis, 403 nT rtHz-1 for the y-axis, and 62 nT rtHz-1 for the z-axis at 1 atm. The presented magnetic sensor could monolithically integrate with other CMOS-MEMS devices for various applications.

  10. Hybrid CMOS SiPIN detectors as astronomical imagers

    NASA Astrophysics Data System (ADS)

    Simms, Lance Michael

    Charge Coupled Devices (CCDs) have dominated optical and x-ray astronomy since their inception in 1969. Only recently, through improvements in design and fabrication methods, have imagers that use Complimentary Metal Oxide Semiconductor (CMOS) technology gained ground on CCDs in scientific imaging. We are now in the midst of an era where astronomers might begin to design optical telescope cameras that employ CMOS imagers. The first three chapters of this dissertation are primarily composed of introductory material. In them, we discuss the potential advantages that CMOS imagers offer over CCDs in astronomical applications. We compare the two technologies in terms of the standard metrics used to evaluate and compare scientific imagers: dark current, read noise, linearity, etc. We also discuss novel features of CMOS devices and the benefits they offer to astronomy. In particular, we focus on a specific kind of hybrid CMOS sensor that uses Silicon PIN photodiodes to detect optical light in order to overcome deficiencies of commercial CMOS sensors. The remaining four chapters focus on a specific type of hybrid CMOS Silicon PIN sensor: the Teledyne Hybrid Visible Silicon PIN Imager (HyViSI). In chapters four and five, results from testing HyViSI detectors in the laboratory and at the Kitt Peak 2.1m telescope are presented. We present our laboratory measurements of the standard detector metrics for a number of HyViSI devices, ranging from 1k×1k to 4k×4k format. We also include a description of the SIDECAR readout circuit that was used to control the detectors. We then show how they performed at the telescope in terms of photometry, astrometry, variability measurement, and telescope focusing and guiding. Lastly, in the final two chapters we present results on detector artifacts such as pixel crosstalk, electronic crosstalk, and image persistence. One form of pixel crosstalk that has not been discussed elsewhere in the literature, which we refer to as Interpixel Charge Transfer (IPCT), is introduced. This effect has an extremely significant impact on x-ray astronomy. For persistence, a new theory and accompanying simulations are presented to explain latent images in the HyViSI. In consideration of these artifacts and the overall measured performance, we argue that HyViSI sensors are ready for application in certain regimes of astronomy, such as telescope guiding, measurements of fast planetary transits, and x-ray imaging, but not for others, such as deep field imaging and large focal plane astronomical surveys.

  11. CMOS compatible micro-scintillators for wireless multi-species radiation detection and tracking

    NASA Astrophysics Data System (ADS)

    Waguespack, Randy; Wilson, Chester G.

    2010-04-01

    This paper reports on an integrated system of wirelessly linked radiation detectors that are sensitive to alpha, beta, gamma, and neutron radiation. The detectors use glass and quartz doped with 10B nanoparticles to detect impinging radiation producing varying optical pulses which exit the material. The varying optical pulses are differentiated by onchip pulse height spectroscopy. Signal discrimination is done with on-chip CMOS circuitry using a 0.35 μm process and a photodiode or photo-multiplier (PM) tube. On-chip CMOS interfacing is key to the production of small integrated radiation detection packages that are cheaper, more reliable, and easier to produce than assembled devices that use commercial off-the-shelf parts. CMOS packages are designed for low power consumption with maximum battery life; this lends itself to creating small, hard to detect radiation sensor packages that are easy to integrate with wireless sensor nodes. The network would use a mesh configuration and transmit real time radiation information from each node to a local hub. As a radiation source enters the coverage area, the data from sensors in the immediate area is transmitted and compared to find the location of the source. Pinpointing the source is achieved by comparing data received from each node. Radiation testing was done using 241Am, 90Sr, and 60Co sources for alpha, beta, and gamma particles. Initial results show that quartz and glass scintillators doped with boron are able to detect each form of radiation. The quartz scintillator is also able to detect neutron radiation particles, which being neutral, are undetected with traditional solid state radiation detectors.

  12. CMOS Image Sensor and System for Imaging Hemodynamic Changes in Response to Deep Brain Stimulation.

    PubMed

    Zhang, Xiao; Noor, Muhammad S; McCracken, Clinton B; Kiss, Zelma H T; Yadid-Pecht, Orly; Murari, Kartikeya

    2016-06-01

    Deep brain stimulation (DBS) is a therapeutic intervention used for a variety of neurological and psychiatric disorders, but its mechanism of action is not well understood. It is known that DBS modulates neural activity which changes metabolic demands and thus the cerebral circulation state. However, it is unclear whether there are correlations between electrophysiological, hemodynamic and behavioral changes and whether they have any implications for clinical benefits. In order to investigate these questions, we present a miniaturized system for spectroscopic imaging of brain hemodynamics. The system consists of a 144 ×144, [Formula: see text] pixel pitch, high-sensitivity, analog-output CMOS imager fabricated in a standard 0.35 μm CMOS process, along with a miniaturized imaging system comprising illumination, focusing, analog-to-digital conversion and μSD card based data storage. This enables stand alone operation without a computer, nor electrical or fiberoptic tethers. To achieve high sensitivity, the pixel uses a capacitive transimpedance amplifier (CTIA). The nMOS transistors are in the pixel while pMOS transistors are column-parallel, resulting in a fill factor (FF) of 26%. Running at 60 fps and exposed to 470 nm light, the CMOS imager has a minimum detectable intensity of 2.3 nW/cm(2) , a maximum signal-to-noise ratio (SNR) of 49 dB at 2.45 μW/cm(2) leading to a dynamic range (DR) of 61 dB while consuming 167 μA from a 3.3 V supply. In anesthetized rats, the system was able to detect temporal, spatial and spectral hemodynamic changes in response to DBS. PMID:26357405

  13. Contact CMOS imaging of gaseous oxygen sensor array.

    PubMed

    Daivasagaya, Daisy S; Yao, Lei; Yi Yung, Ka; Hajj-Hassan, Mohamad; Cheung, Maurice C; Chodavarapu, Vamsy P; Bright, Frank V

    2011-10-01

    We describe a compact luminescent gaseous oxygen (O2) sensor microsystem based on the direct integration of sensor elements with a polymeric optical filter and placed on a low power complementary metal-oxide semiconductor (CMOS) imager integrated circuit (IC). The sensor operates on the measurement of excited-state emission intensity of O2-sensitive luminophore molecules tris(4,7-diphenyl-1,10-phenanthroline) ruthenium(II) ([Ru(dpp)3](2+)) encapsulated within sol-gel derived xerogel thin films. The polymeric optical filter is made with polydimethylsiloxane (PDMS) that is mixed with a dye (Sudan-II). The PDMS membrane surface is molded to incorporate arrays of trapezoidal microstructures that serve to focus the optical sensor signals on to the imager pixels. The molded PDMS membrane is then attached with the PDMS color filter. The xerogel sensor arrays are contact printed on top of the PDMS trapezoidal lens-like microstructures. The CMOS imager uses a 32 32 (1024 elements) array of active pixel sensors and each pixel includes a high-gain phototransistor to convert the detected optical signals into electrical currents. Correlated double sampling circuit, pixel address, digital control and signal integration circuits are also implemented on-chip. The CMOS imager data is read out as a serial coded signal. The CMOS imager consumes a static power of 320 W and an average dynamic power of 625 W when operating at 100 Hz sampling frequency and 1.8 V DC. This CMOS sensor system provides a useful platform for the development of miniaturized optical chemical gas sensors. PMID:24493909

  14. Contact CMOS imaging of gaseous oxygen sensor array

    PubMed Central

    Daivasagaya, Daisy S.; Yao, Lei; Yi Yung, Ka; Hajj-Hassan, Mohamad; Cheung, Maurice C.; Chodavarapu, Vamsy P.; Bright, Frank V.

    2014-01-01

    We describe a compact luminescent gaseous oxygen (O2) sensor microsystem based on the direct integration of sensor elements with a polymeric optical filter and placed on a low power complementary metal-oxide semiconductor (CMOS) imager integrated circuit (IC). The sensor operates on the measurement of excited-state emission intensity of O2-sensitive luminophore molecules tris(4,7-diphenyl-1,10-phenanthroline) ruthenium(II) ([Ru(dpp)3]2+) encapsulated within solgel derived xerogel thin films. The polymeric optical filter is made with polydimethylsiloxane (PDMS) that is mixed with a dye (Sudan-II). The PDMS membrane surface is molded to incorporate arrays of trapezoidal microstructures that serve to focus the optical sensor signals on to the imager pixels. The molded PDMS membrane is then attached with the PDMS color filter. The xerogel sensor arrays are contact printed on top of the PDMS trapezoidal lens-like microstructures. The CMOS imager uses a 32 32 (1024 elements) array of active pixel sensors and each pixel includes a high-gain phototransistor to convert the detected optical signals into electrical currents. Correlated double sampling circuit, pixel address, digital control and signal integration circuits are also implemented on-chip. The CMOS imager data is read out as a serial coded signal. The CMOS imager consumes a static power of 320 W and an average dynamic power of 625 W when operating at 100 Hz sampling frequency and 1.8 V DC. This CMOS sensor system provides a useful platform for the development of miniaturized optical chemical gas sensors. PMID:24493909

  15. Note: All-digital CMOS MOS-capacitor-based pulse-shrinking mechanism suitable for time-to-digital converters.

    PubMed

    Chen, Chun-Chi; Hwang, Chorng-Sii; Lin, You-Ting; Liu, Keng-Chih

    2015-12-01

    This paper presents an all-digital CMOS pulse-shrinking mechanism suitable for time-to-digital converters (TDCs). A simple MOS capacitor is used as a pulse-shrinking cell to perform time attenuation for time resolving. Compared with a previous pulse-shrinking mechanism, the proposed mechanism provides an appreciably improved temporal resolution with high linearity. Furthermore, the use of a binary-weighted pulse-shrinking unit with scaled MOS capacitors is proposed for achieving a programmable resolution. A TDC involving the proposed mechanism was fabricated using a TSMC (Taiwan Semiconductor Manufacturing Company) 0.18-μm CMOS process, and it has a small area of nearly 0.02 mm(2) and an integral nonlinearity error of ±0.8 LSB for a resolution of 24 ps. PMID:26724094

  16. Real-time optically sectioned wide-field microscopy employing structured light illumination and a CMOS detector

    NASA Astrophysics Data System (ADS)

    Mitic, Jelena; Anhut, Tiemo; Serov, Alexandre; Lasser, Theo; Bourquin, Stephane

    2003-07-01

    Real-time optically sectioned microscopy is demonstrated using an AC-sensitive detection concept realized with smart CMOS image sensor and structured light illumination by a continuously moving periodic pattern. We describe two different detection systems based on CMOS image sensors for the detection and on-chip processing of the sectioned images in real time. A region-of-interest is sampled at high frame rate. The demodulated signal delivered by the detector corresponds to the depth discriminated image of the sample. The measured FWHM of the axial response depends on the spatial frequency of the projected grid illumination and is in the ?m-range. The effect of using broadband incoherent illumination is discussed. The performance of these systems is demonstrated by imaging technical as well as biological samples.

  17. Design of dynamic-floating-gate technique for output ESD protection in deep-submicron CMOS technology

    NASA Astrophysics Data System (ADS)

    Chang, Hun-Hsien; Ker, Ming-Dou; Wu, Jiin-Chuan

    1999-02-01

    A novel dynamic-floating-gate technique is proposed to improve ESD robustness of the CMOS output buffers with small driving/sinking currents. This dynamic-floating-gate design can effectively solve the ESD protection issue which is due to the different circuit connections on the output devices. By adding suitable time delay to dynamically float the gates of the output NMOS/PMOS devices which are originally unused in the output buffer, the human-body-model (machine-model) ESD failure threshold of a 2-mA output buffer can be practically improved from the original 1.0 kV (100 V) up to greater than 8 kV (1500 V) in a 0.35-?m bulk CMOS process.

  18. A high-frequency transimpedance amplifier for CMOS integrated 2D CMUT array towards 3D ultrasound imaging.

    PubMed

    Huang, Xiwei; Cheong, Jia Hao; Cha, Hyouk-Kyu; Yu, Hongbin; Je, Minkyu; Yu, Hao

    2013-01-01

    One transimpedance amplifier based CMOS analog front-end (AFE) receiver is integrated with capacitive micromachined ultrasound transducers (CMUTs) towards high frequency 3D ultrasound imaging. Considering device specifications from CMUTs, the TIA is designed to amplify received signals from 17.5MHz to 52.5MHz with center frequency at 35MHz; and is fabricated in Global Foundry 0.18-m 30-V high-voltage (HV) Bipolar/CMOS/DMOS (BCD) process. The measurement results show that the TIA with power-supply 6V can reach transimpedance gain of 61dB? and operating frequency from 17.5MHz to 100MHz. The measured input referred noise is 27.5pA/?Hz. Acoustic pulse-echo testing is conducted to demonstrate the receiving functionality of the designed 3D ultrasound imaging system. PMID:24109634

  19. Note: All-digital CMOS MOS-capacitor-based pulse-shrinking mechanism suitable for time-to-digital converters

    NASA Astrophysics Data System (ADS)

    Chen, Chun-Chi; Hwang, Chorng-Sii; Lin, You-Ting; Liu, Keng-Chih

    2015-12-01

    This paper presents an all-digital CMOS pulse-shrinking mechanism suitable for time-to-digital converters (TDCs). A simple MOS capacitor is used as a pulse-shrinking cell to perform time attenuation for time resolving. Compared with a previous pulse-shrinking mechanism, the proposed mechanism provides an appreciably improved temporal resolution with high linearity. Furthermore, the use of a binary-weighted pulse-shrinking unit with scaled MOS capacitors is proposed for achieving a programmable resolution. A TDC involving the proposed mechanism was fabricated using a TSMC (Taiwan Semiconductor Manufacturing Company) 0.18-?m CMOS process, and it has a small area of nearly 0.02 mm2 and an integral nonlinearity error of 0.8 LSB for a resolution of 24 ps.

  20. A CMOS pressure sensor with integrated interface for passive RFID applications

    NASA Astrophysics Data System (ADS)

    Deng, Fangming; He, Yigang; Wu, Xiang; Fu, Zhihui

    2014-12-01

    This paper presents a CMOS pressure sensor with integrated interface for passive RFID sensing applications. The pressure sensor consists of three parts: top electrode, dielectric layer and bottom electrode. The dielectric layer consists of silicon oxide and an air gap. The bottom electrode is made of polysilicon. The gap is formed by sacrificial layer release and the Al vapor process is used to seal the gap and form the top electrode. The sensor interface is based on phase-locked architecture, which allows the use of fully digital blocks. The proposed pressure sensor and interface is fabricated in a 0.18 μm CMOS process. The measurement results show the pressure sensor achieves excellent linearity with a sensitivity of 1.2 fF kPa-1. The sensor interface consumes only 1.1 µW of power at 0.5 V voltage supply, which is at least an order of magnitude better than state-of-the-art designs.

  1. Radiation hardening of CMOS-based circuitry in SMART transmitters. Phase 1, Feasibility: Final report

    SciTech Connect

    Loescher, D.H.

    1993-02-01

    Process control transmitters that incorporate digital signal processing could be used advantageously in nuclear power plants; however, because such transmitters are too sensitive to radiation, they are not used. The Electric Power Research Institute sponsored work at Sandia National Laboratories under EPRI contract RP2614-58 to determine why SMART transmitters fail when exposed to radiation and to design and demonstrate SMART transmitter circuits that could tolerate radiation. The term ``SMART`` denotes transmitters that contain digital logic. Tests showed that transmitter failure was caused by failure of the complementary metal oxide semiconductors (CMOS)-integrated circuits which are used extensively in commercial transmitters. Radiation-hardened replacements were not available for the radiation-sensitive CMOS circuits. A conceptual design showed that a radiation-tolerant transmitter could be constructed. A prototype for an analog-to-digital converter subsection worked satisfactorily after a total dose of 30 megarads(Si). Encouraging results were obtained from preliminary bench-top tests on a dc-to-dc converter for the power supply subsection.

  2. CMOS-Compatible Silicon-Nanowire-Based Coulter Counter for Cell Enumeration.

    PubMed

    Chen, Yu; Guo, Jinhong; Muhammad, Hamidullah; Kang, Yuejun; Ary, Sunil K

    2016-02-01

    A silicon-nanowire-based Coulter counter has been designed and fabricated for particle/cell enumeration. The silicon nanowire was fabricated in a fully complementary metal-oxide-semiconductor (CMOS)-compatible process and used as a field effect transistor (FET) device. The Coulter counter device worked on the principle of potential change detection introduced by the passing of microparticles/cells through a sensing channel. Device uniformity was confirmed by scanning electron microscopy and transmission electron microscopy. Current-voltage measurement showed the high sensitivity of the nanowire FET device to the surface potential change. The results revealed that the silicon-nanowire-based Coulter counter can differentiate polystyrene beads with diameters of 8 and 15 μm. Michigan Cancer Foundation-7 (MCF-7) cells have been successfully counted to validate the device. A fully CMOS-compatible fabrication process can help the device integration and facilitate the development of sensor arrays for high throughput application. With appropriate sample preparation steps, it is also possible to expand the work to applications such as rare-cells detection. PMID:26799578

  3. A Novel Modeling and Evaluating for RTS Noise on CMOS Image Sensor in Motion Picture

    NASA Astrophysics Data System (ADS)

    Zhang, Deng; Ryu, Jegoon; Nishimura, Toshihiro

    The precise noise modeling of complementary metal oxide semiconductor image sensor (CMOS image sensor: CIS) is a significant key in understanding the noise source mechanisms, optimizing sensor design, designing noise reduction circuit, and enhancing image quality. Therefore, this paper presents an accurate random telegraph signal (RTS) noise analysis model and a novel quantitative evaluation method in motion picture for the visual sensory evaluation of CIS. In this paper, two main works will be introduced. One is that the exposure process of a video camera is simulated, in which a Gaussian noise and an RTS noise in pinned-photodiode CMOS pixels are modeled in time domain and spatial domain; the other is that a new video quality evaluation method for RTS noise is proposed. Simulation results obtained reveal that the proposed noise modeling for CIS can approximate its physical process and the proposed video quality evaluation method for RTS noise performs effectively as compared to other evaluation methods. Based on the experimental results, conclusions on how the spatial distribution of an RTS noise affects the quality of motion picture are carried out.

  4. A Time-Domain CMOS Oscillator-Based Thermostat with Digital Set-Point Programming

    PubMed Central

    Chen, Chun-Chi; Lin, Shih-Hao

    2013-01-01

    This paper presents a time-domain CMOS oscillator-based thermostat with digital set-point programming [without a digital-to-analog converter (DAC) or external resistor] to achieve on-chip thermal management of modern VLSI systems. A time-domain delay-line-based thermostat with multiplexers (MUXs) was used to substantially reduce the power consumption and chip size, and can benefit from the performance enhancement due to the scaling down of fabrication processes. For further cost reduction and accuracy enhancement, this paper proposes a thermostat using two oscillators that are suitable for time-domain curvature compensation instead of longer linear delay lines. The final time comparison was achieved using a time comparator with a built-in custom hysteresis to generate the corresponding temperature alarm and control. The chip size of the circuit was reduced to 0.12 mm2 in a 0.35-?m TSMC CMOS process. The thermostat operates from 0 to 90 C, and achieved a fine resolution better than 0.05 C and an improved inaccuracy of 0.6 C after two-point calibration for eight packaged chips. The power consumption was 30 ?W at a sample rate of 10 samples/s. PMID:23385403

  5. Development of a CMOS MEMS pressure sensor with a mechanical force-displacement transduction structure

    NASA Astrophysics Data System (ADS)

    Cheng, Chao-Lin; Chang, Heng-Chung; Chang, Chun-I.; Fang, Weileun

    2015-12-01

    This study presents a capacitive pressure sensor with a mechanical force-displacement transduction structure based on the commercially available standard CMOS process (the TSMC 0.18 ?m 1P6M CMOS process). The pressure sensor has a deformable diaphragm to support a movable plate with an embedded sensing electrode. As the diaphragm is deformed by the ambient pressure, the movable plate and its embedded sensing electrode are displaced. Thus, the pressure is detected from the capacitance change between the movable and fixed electrodes. The undeformed movable electrode will increase the effective sensing area between the sensing electrodes, thereby improving the sensitivity. Experimental results show that the proposed pressure sensor with a force-displacement transducer will increase the sensitivity by 126% within the 20 kPa300 kPa absolute pressure range. Moreover, this study extends the design to add pillars inside the pressure sensor to further increase its sensing area as well as sensitivity. A sensitivity improvement of 117% is also demonstrated for a pressure sensor with an enlarged sensing electrode (the overlap area is increased two fold).

  6. A time-domain CMOS oscillator-based thermostat with digital set-point programming.

    PubMed

    Chen, Chun-Chi; Lin, Shih-Hao

    2013-01-01

    This paper presents a time-domain CMOS oscillator-based thermostat with digital set-point programming [without a digital-to-analog converter (DAC) or external resistor] to achieve on-chip thermal management of modern VLSI systems. A time-domain delay-line-based thermostat with multiplexers (MUXs) was used to substantially reduce the power consumption and chip size, and can benefit from the performance enhancement due to the scaling down of fabrication processes. For further cost reduction and accuracy enhancement, this paper proposes a thermostat using two oscillators that are suitable for time-domain curvature compensation instead of longer linear delay lines. The final time comparison was achieved using a time comparator with a built-in custom hysteresis to generate the corresponding temperature alarm and control. The chip size of the circuit was reduced to 0.12 mm2 in a 0.35-mm TSMC CMOS process. The thermostat operates from 0 to 90 C, and achieved a fine resolution better than 0.05 C and an improved inaccuracy of 0.6 C after two-point calibration for eight packaged chips. The power consumption was 30 W at a sample rate of 10 samples/s. PMID:23385403

  7. CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties

    PubMed Central

    Chuang, Wan-Chun; Hu, Yuh-Chung; Chang, Pei-Zen

    2012-01-01

    This paper develops the technologies of mechanical characterization of CMOS-MEMS devices, and presents a robust algorithm for extracting mechanical properties, such as Youngs modulus, and mean stress, through the external electrical circuit behavior of the micro test-key. An approximate analytical solution for the pull-in voltage of bridge-type test-key subjected to electrostatic load and initial stress is derived based on Eulers beam model and the minimum energy method. Then one can use the aforesaid closed form solution of the pull-in voltage to extract the Youngs modulus and mean stress of the test structures. The test cases include the test-key fabricated by a TSMC 0.18 ?m standard CMOS process, and the experimental results refer to Osterbergs work on the pull-in voltage of single crystal silicone microbridges. The extracted material properties calculated by the present algorithm are valid. Besides, this paper also analyzes the robustness of this algorithm regarding the dimension effects of test-keys. This mechanical properties extracting method is expected to be applicable to the wafer-level testing in micro-device manufacture and compatible with the wafer-level testing in IC industry since the test process is non-destructive. PMID:23235449

  8. CMOS-MEMS test-key for extracting wafer-level mechanical properties.

    PubMed

    Chuang, Wan-Chun; Hu, Yuh-Chung; Chang, Pei-Zen

    2012-01-01

    This paper develops the technologies of mechanical characterization of CMOS-MEMS devices, and presents a robust algorithm for extracting mechanical properties, such as Young's modulus, and mean stress, through the external electrical circuit behavior of the micro test-key. An approximate analytical solution for the pull-in voltage of bridge-type test-key subjected to electrostatic load and initial stress is derived based on Euler's beam model and the minimum energy method. Then one can use the aforesaid closed form solution of the pull-in voltage to extract the Young's modulus and mean stress of the test structures. The test cases include the test-key fabricated by a TSMC 0.18 ?m standard CMOS process, and the experimental results refer to Osterberg's work on the pull-in voltage of single crystal silicone microbridges. The extracted material properties calculated by the present algorithm are valid. Besides, this paper also analyzes the robustness of this algorithm regarding the dimension effects of test-keys. This mechanical properties extracting method is expected to be applicable to the wafer-level testing in micro-device manufacture and compatible with the wafer-level testing in IC industry since the test process is non-destructive. PMID:23235449

  9. Efficient design method for cell allocation in hybrid CMOS/nanodevices using a cultural algorithm with chaotic behavior

    NASA Astrophysics Data System (ADS)

    Pan, Zhong-Liang; Chen, Ling; Zhang, Guang-Zhao

    2016-04-01

    The hybrid CMOS molecular (CMOL) circuit, which combines complementary metal-oxide-semiconductor (CMOS) components with nanoscale wires and switches, can exhibit significantly improved performance. In CMOL circuits, the nanodevices, which are called cells, should be placed appropriately and are connected by nanowires. The cells should be connected such that they follow the shortest path. This paper presents an efficient method of cell allocation in CMOL circuits with the hybrid CMOS/nanodevice structure; the method is based on a cultural algorithm with chaotic behavior. The optimal model of cell allocation is derived, and the coding of an individual representing a cell allocation is described. Then the cultural algorithm with chaotic behavior is designed to solve the optimal model. The cultural algorithm consists of a population space, a belief space, and a protocol that describes how knowledge is exchanged between the population and belief spaces. In this paper, the evolutionary processes of the population space employ a genetic algorithm in which three populations undergo parallel evolution. The evolutionary processes of the belief space use a chaotic ant colony algorithm. Extensive experiments on cell allocation in benchmark circuits showed that a low area usage can be obtained using the proposed method, and the computation time can be reduced greatly compared to that of a conventional genetic algorithm.

  10. CMOS VLSI Active-Pixel Sensor for Tracking

    NASA Technical Reports Server (NTRS)

    Pain, Bedabrata; Sun, Chao; Yang, Guang; Heynssens, Julie

    2004-01-01

    An architecture for a proposed active-pixel sensor (APS) and a design to implement the architecture in a complementary metal oxide semiconductor (CMOS) very-large-scale integrated (VLSI) circuit provide for some advanced features that are expected to be especially desirable for tracking pointlike features of stars. The architecture would also make this APS suitable for robotic- vision and general pointing and tracking applications. CMOS imagers in general are well suited for pointing and tracking because they can be configured for random access to selected pixels and to provide readout from windows of interest within their fields of view. However, until now, the architectures of CMOS imagers have not supported multiwindow operation or low-noise data collection. Moreover, smearing and motion artifacts in collected images have made prior CMOS imagers unsuitable for tracking applications. The proposed CMOS imager (see figure) would include an array of 1,024 by 1,024 pixels containing high-performance photodiode-based APS circuitry. The pixel pitch would be 9 m. The operations of the pixel circuits would be sequenced and otherwise controlled by an on-chip timing and control block, which would enable the collection of image data, during a single frame period, from either the full frame (that is, all 1,024 1,024 pixels) or from within as many as 8 different arbitrarily placed windows as large as 8 by 8 pixels each. A typical prior CMOS APS operates in a row-at-a-time ( grolling-shutter h) readout mode, which gives rise to exposure skew. In contrast, the proposed APS would operate in a sample-first/readlater mode, suppressing rolling-shutter effects. In this mode, the analog readout signals from the pixels corresponding to the windows of the interest (which windows, in the star-tracking application, would presumably contain guide stars) would be sampled rapidly by routing them through a programmable diagonal switch array to an on-chip parallel analog memory array. The diagonal-switch and memory addresses would be generated by the on-chip controller. The memory array would be large enough to hold differential signals acquired from all 8 windows during a frame period. Following the rapid sampling from all the windows, the contents of the memory array would be read out sequentially by use of a capacitive transimpedance amplifier (CTIA) at a maximum data rate of 10 MHz. This data rate is compatible with an update rate of almost 10 Hz, even in full-frame operation

  11. A 16 × 16 CMOS Capacitive Biosensor Array Towards Detection of Single Bacterial Cell.

    PubMed

    Couniot, Numa; Francis, Laurent A; Flandre, Denis

    2016-04-01

    We present a 16 × 16 CMOS biosensor array aiming at impedance detection of whole-cell bacteria. Each 14 μm×16 μm pixel comprises high-sensitive passivated microelectrodes connected to an innovative readout interface based on charge sharing principle for capacitance-to-voltage conversion and subthreshold gain stage to boost the sensitivity. Fabricated in a 0.25 μm CMOS process, the capacitive array was experimentally shown to perform accurate dielectric measurements of the electrolyte up to electrical conductivities of 0.05 S/m, with maximal sensitivity of 55 mV/fF and signal-to-noise ratio (SNR) of 37 dB. As biosensing proof of concept, real-time detection of Staphylococcus epidermidis binding events was experimentally demonstrated and provides detection limit of ca. 7 bacteria per pixel and sensitivity of 2.18 mV per bacterial cell. Models and simulations show good matching with experimental results and provide a comprehensive analysis of the sensor and circuit system. Advantages, challenges and limits of the proposed capacitive biosensor array are finally described with regards to literature. With its small area and low power consumption, the present capacitive array is particularly suitable for portable point-of-care (PoC) diagnosis tools and lab-on-chip (LoC) systems. PMID:25974947

  12. A low-noise CMOS pixel direct charge sensor, Topmetal-II-

    NASA Astrophysics Data System (ADS)

    An, Mangmang; Chen, Chufeng; Gao, Chaosong; Han, Mikyung; Ji, Rong; Li, Xiaoting; Mei, Yuan; Sun, Quan; Sun, Xiangming; Wang, Kai; Xiao, Le; Yang, Ping; Zhou, Wei

    2016-02-01

    We report the design and characterization of a CMOS pixel direct charge sensor, Topmetal-II-, fabricated in a standard 0.35 μm CMOS Integrated Circuit process. The sensor utilizes exposed metal patches on top of each pixel to directly collect charge. Each pixel contains a low-noise charge-sensitive preamplifier to establish the analog signal and a discriminator with tunable threshold to generate hits. The analog signal from each pixel is accessible through time-shared multiplexing over the entire array. Hits are read out digitally through a column-based priority logic structure. Tests show that the sensor achieved a < 15e- analog noise and a 200e- minimum threshold for digital readout per pixel. The sensor is capable of detecting both electrons and ions drifting in gas. These characteristics enable its use as the charge readout device in future Time Projection Chambers without gaseous gain mechanism, which has unique advantages in low background and low rate-density experiments.

  13. Using polynomials to simplify fixed pattern noise and photometric correction of logarithmic CMOS image sensors.

    PubMed

    Li, Jing; Mahmoodi, Alireza; Joseph, Dileepan

    2015-01-01

    An important class of complementary metal-oxide-semiconductor (CMOS) image sensors are those where pixel responses are monotonic nonlinear functions of light stimuli. This class includes various logarithmic architectures, which are easily capable of wide dynamic range imaging, at video rates, but which are vulnerable to image quality issues. To minimize fixed pattern noise (FPN) and maximize photometric accuracy, pixel responses must be calibrated and corrected due to mismatch and process variation during fabrication. Unlike literature approaches, which employ circuit-based models of varying complexity, this paper introduces a novel approach based on low-degree polynomials. Although each pixel may have a highly nonlinear response, an approximately-linear FPN calibration is possible by exploiting the monotonic nature of imaging. Moreover, FPN correction requires only arithmetic, and an optimal fixed-point implementation is readily derived, subject to a user-specified number of bits per pixel. Using a monotonic spline, involving cubic polynomials, photometric calibration is also possible without a circuit-based model, and fixed-point photometric correction requires only a look-up table. The approach is experimentally validated with a logarithmic CMOS image sensor and is compared to a leading approach from the literature. The novel approach proves effective and efficient. PMID:26501287

  14. A 12-bit 500KSPS cyclic ADC for CMOS image sensor

    NASA Astrophysics Data System (ADS)

    Li, Zhaohan; Wang, Gengyun; Peng, Leli; Ma, Cheng; Chang, Yuchun

    2015-03-01

    At present, single-slope analog-to-digital convertor (ADC) is widely used in the readout circuits of CMOS image sensor (CIS) while its main drawback is the high demand for the system clock frequency. The more pixels and higher ADC resolution the image sensor system needs, the higher system clock frequency is required. To overcome this problem in high dynamic range CIS system, this paper presents a 12-bit 500-KS/s cyclic ADC, in which the system clock frequency is 5MHz. Therefore, comparing with the system frequency of 2NfS for the single-slope ADC, where fS, N is the sampling frequency and resolution, respectively, the higher ADC resolution doesn't need the higher system clock frequency. With 0.18?m CMOS process, the circuit layout is realized and occupies an area of 8?m374?m. Post simulation results show that Signal-to-Noise-and-Distortion-Ratio (SNDR) and Efficient Number of Bit (ENOB) reaches 63.7dB and 10.3bit, respectively.

  15. CMOS image sensor noise reduction method for image signal processor in digital cameras and camera phones

    NASA Astrophysics Data System (ADS)

    Yoo, Youngjin; Lee, SeongDeok; Choe, Wonhee; Kim, Chang-Yong

    2007-02-01

    Digital images captured from CMOS image sensors suffer Gaussian noise and impulsive noise. To efficiently reduce the noise in Image Signal Processor (ISP), we analyze noise feature for imaging pipeline of ISP where noise reduction algorithm is performed. The Gaussian noise reduction and impulsive noise reduction method are proposed for proper ISP implementation in Bayer domain. The proposed method takes advantage of the analyzed noise feature to calculate noise reduction filter coefficients. Thus, noise is adaptively reduced according to the scene environment. Since noise is amplified and characteristic of noise varies while the image sensor signal undergoes several image processing steps, it is better to remove noise in earlier stage on imaging pipeline of ISP. Thus, noise reduction is carried out in Bayer domain on imaging pipeline of ISP. The method is tested on imaging pipeline of ISP and images captured from Samsung 2M CMOS image sensor test module. The experimental results show that the proposed method removes noise while effectively preserves edges.

  16. A high efficiency PWM CMOS class-D audio power amplifier

    NASA Astrophysics Data System (ADS)

    Zhangming, Zhu; Lianxi, Liu; Yintang, Yang; Han, Lei

    2009-02-01

    Based on the difference close-loop feedback technique and the difference pre-amp, a high efficiency PWM CMOS class-D audio power amplifier is proposed. A rail-to-rail PWM comparator with window function has been embedded in the class-D audio power amplifier. Design results based on the CSMC 0.5 μm CMOS process show that the max efficiency is 90%, the PSRR is -75 dB, the power supply voltage range is 2.5-5.5 V, the THD+N in 1 kHz input frequency is less than 0.20%, the quiescent current in no load is 2.8 mA, and the shutdown current is 0.5 μA. The active area of the class-D audio power amplifier is about 1.47 × 1.52 mm2. With the good performance, the class-D audio power amplifier can be applied to several audio power systems.

  17. Using a large area CMOS APS for direct chemiluminescence detection in Western blotting electrophoresis

    NASA Astrophysics Data System (ADS)

    Esposito, Michela; Newcombe, Jane; Anaxagoras, Thalis; Allinson, Nigel M.; Wells, Kevin

    2012-03-01

    Western blotting electrophoretic sequencing is an analytical technique widely used in Functional Proteomics to detect, recognize and quantify specific labelled proteins in biological samples. A commonly used label for western blotting is Enhanced ChemiLuminescence (ECL) reagents based on fluorescent light emission of Luminol at 425nm. Film emulsion is the conventional detection medium, but is characterized by non-linear response and limited dynamic range. Several western blotting digital imaging systems have being developed, mainly based on the use of cooled Charge Coupled Devices (CCDs) and single avalanche diodes that address these issues. Even so these systems present key drawbacks, such as a low frame rate and require operation at low temperature. Direct optical detection using Complementary Metal Oxide Semiconductor (CMOS) Active Pixel Sensors (APS)could represent a suitable digital alternative for this application. In this paper the authors demonstrate the viability of direct chemiluminescent light detection in western blotting electrophoresis using a CMOS APS at room temperature. Furthermore, in recent years, improvements in fabrication techniques have made available reliable processes for very large imagers, which can be now scaled up to wafer size, allowing direct contact imaging of full size western blotting samples. We propose using a novel wafer scale APS (12.8 cm×13.2 cm), with an array architecture using two different pixel geometries that can deliver an inherently low noise and high dynamic range image at the same time representing a dramatic improvement with respect to the current western blotting imaging systems.

  18. A Low-power CMOS BFSK Transceiver for Health Monitoring Systems

    PubMed Central

    Kim, Sungho; Lepkowski, William; Wilk, Seth J.; Thornton, Trevor J.; Bakkaloglu, Bertan

    2014-01-01

    A CMOS low-power transceiver for implantable and external health monitoring devices operating in the MICS band is presented. The LNA core has an integrated mixer in a folded configuration to reuse the bias current, allowing high linearity with a low power supply levels. The baseband strip consists of a pseudo differential MOS-C band-pass filter achieving demodulation of 150kHz-offset BFSK signals. An all digital frequency-locked loop is used for LO generation in the RX mode and for driving a class AB power amplifier in the TX mode. The MICS transceiver is designed and fabricated in a 0.18μm 1-poly, 6-metal CMOS process. The sensitivities of −70dBm and −98dBm were achieved with NF of 40dB and 11dB at the data rate of 100kb/s while consuming only 600μW and 1.5mW at 1.2V and 1.8V, respectively. The BERs are less than 10−3 at the input powers of −70dBm at 1.2V and −98dBm at 1.8V at the data rate of 100kb/s. Finally, the output power of the transmitter is 0dBm for a power consumption of 1.8mW. PMID:24473462

  19. Advances in CMOS Solid-state Photomultipliers for Scintillation Detector Applications

    PubMed Central

    Christian, James F.; Stapels, Christopher J.; Johnson, Erik B.; McClish, Mickel; Dokhale, Purushotthom; Shah, Kanai S.; Mukhopadhyay, Sharmistha; Chapman, Eric; Augustine, Frank L.

    2014-01-01

    Solid-state photomultipliers (SSPMs) are a compact, lightweight, potentially low-cost alternative to a photomultiplier tube for a variety of scintillation detector applications, including digital-dosimeter and medical-imaging applications. Manufacturing SSPMs with a commercial CMOS process provides the ability for rapid prototyping, and facilitates production to reduce the cost. RMD designs CMOS SSPM devices that are fabricated by commercial foundries. This work describes the characterization and performance of these devices for scintillation detector applications. This work also describes the terms contributing to device noise in terms of the excess noise of the SSPM, the binomial statistics governing the number of pixels triggered by a scintillation event, and the background, or thermal, count rate. The fluctuations associated with these terms limit the resolution of the signal pulse amplitude. We explore the use of pixel-level signal conditioning, and characterize the performance of a prototype SSPM device that preserves the digital nature of the signal. In addition, we explore designs of position-sensitive SSPM detectors for medical imaging applications, and characterize their performance. PMID:25540471

  20. Spatial optical crosstalk in CMOS image sensors integrated with plasmonic color filters.

    PubMed

    Yu, Yan; Chen, Qin; Wen, Long; Hu, Xin; Zhang, Hui-Fang

    2015-08-24

    Imaging resolution of complementary metal oxide semiconductor (CMOS) image sensor (CIS) keeps increasing to approximately 7k × 4k. As a result, the pixel size shrinks down to sub-2μm, which greatly increases the spatial optical crosstalk. Recently, plasmonic color filter was proposed as an alternative to conventional colorant pigmented ones. However, there is little work on its size effect and the spatial optical crosstalk in a model of CIS. By numerical simulation, we investigate the size effect of nanocross array plasmonic color filters and analyze the spatial optical crosstalk of each pixel in a Bayer array of a CIS with a pixel size of 1μm. It is found that the small pixel size deteriorates the filtering performance of nanocross color filters and induces substantial spatial color crosstalk. By integrating the plasmonic filters in the low Metal layer in standard CMOS process, the crosstalk reduces significantly, which is compatible to pigmented filters in a state-of-the-art backside illumination CIS. PMID:26368174

  1. A diode-based bolometer implemented on micromachined CMOS technology for terahertz radiation detection

    NASA Astrophysics Data System (ADS)

    Perenzoni, Matteo; Domingues, Suzana

    2012-06-01

    In this work an antenna-coupled diode-based microbolometer implemented in a 0.35?m CMOS technology with a low-cost maskless micromachining post-process is proposed. The device is suspended above the substrate on an oxide membrane by removing the silicon underneath. It is composed of an antenna connected to a matched load, which heats up proportionally to the captured electromagnetic radiation, and heat sensing elements. These elements consist of several series polysilicon diodes placed near the antenna load, while an identical set of diodes is also included as a reference to track ambient temperature variations. Theoretical calculations and preliminary temperature characterization of polysilicon diodes have been performed. Different antenna sizes have been used so as to obtain detectors for 0.5THz, 1.0THz, and 2.0THz frequency operation. Thanks to the use of a standard CMOS technology, in the same chip a custom designed readout circuit has been integrated with the objective to maximize the performance of the detectors through signal amplification and filtering.

  2. A high-efficiency low-voltage CMOS rectifier for harvesting energy in implantable devices.

    PubMed

    Hashemi, S Saeid; Sawan, Mohamad; Savaria, Yvon

    2012-08-01

    We present, in this paper, a new full-wave CMOS rectifier dedicated for wirelessly-powered low-voltage biomedical implants. It uses bootstrapped capacitors to reduce the effective threshold voltage of selected MOS switches. It achieves a significant increase in its overall power efficiency and low voltage-drop. Therefore, the rectifier is good for applications with low-voltage power supplies and large load current. The rectifier topology does not require complex circuit design. The highest voltages available in the circuit are used to drive the gates of selected transistors in order to reduce leakage current and to lower their channel on-resistance, while having high transconductance. The proposed rectifier was fabricated using the standard TSMC 0.18 ?m CMOS process. When connected to a sinusoidal source of 3.3 V peak amplitude, it allows improving the overall power efficiency by 11% compared to the best recently published results given by a gate cross-coupled-based structure. PMID:23853177

  3. A Linearization Time-Domain CMOS Smart Temperature Sensor Using a Curvature Compensation Oscillator

    PubMed Central

    Chen, Chun-Chi; Chen, Hao-Wen

    2013-01-01

    This paper presents an area-efficient time-domain CMOS smart temperature sensor using a curvature compensation oscillator for linearity enhancement with a ?40 to 120 C temperature range operability. The inverter-based smart temperature sensors can substantially reduce the cost and circuit complexity of integrated temperature sensors. However, a large curvature exists on the temperature-to-time transfer curve of the inverter-based delay line and results in poor linearity of the sensor output. For cost reduction and error improvement, a temperature-to-pulse generator composed of a ring oscillator and a time amplifier was used to generate a thermal sensing pulse with a sufficient width proportional to the absolute temperature (PTAT). Then, a simple but effective on-chip curvature compensation oscillator is proposed to simultaneously count and compensate the PTAT pulse with curvature for linearization. With such a simple structure, the proposed sensor possesses an extremely small area of 0.07 mm2 in a TSMC 0.35-?m CMOS 2P4M digital process. By using an oscillator-based scheme design, the proposed sensor achieves a fine resolution of 0.045 C without significantly increasing the circuit area. With the curvature compensation, the inaccuracy of ?1.2 to 0.2 C is achieved in an operation range of ?40 to 120 C after two-point calibration for 14 packaged chips. The power consumption is measured as 23 ?W at a sample rate of 10 samples/s. PMID:23989825

  4. A Wideband Noise-canceling CMOS LNA Using Cross-coupled Feedback and Bulk Effect

    NASA Astrophysics Data System (ADS)

    Guo, Benqing; Yang, Guoning; An, Shiquan

    2014-05-01

    An improved wideband common-gate (CG) and common-source (CS) CMOS LNA with noise cancellation is proposed. The cross-coupled feedback between the CG input transistor and the cascode transistor of CS input stage is used to increase the input transconductance of the LNA. And the bulk effect of CS input transistors is utilized to enhance gm-boosting coefficient. Thus, comparable gain and noise are achieved by reduced bias currents of the LNA while the resulted additional NF degradation is negligible. Fabricated in a 0.13 ?m RF CMOS process, the LNA achieves a flat voltage gain of 18 dB, an NF of 2.7~3.2 dB, and an IIP3 of -4.5~-7.4 dBm over a 3 dB bandwidth of 0.1~4.4 GHz. It consumes only 4.1 mA from a 1 V supply and occupies an area of 520 490 um2. In contrast to those of reported wideband LNAs, the proposed LNA has the merit of lower power consumption and lower supply voltage.

  5. Using Polynomials to Simplify Fixed Pattern Noise and Photometric Correction of Logarithmic CMOS Image Sensors

    PubMed Central

    Li, Jing; Mahmoodi, Alireza; Joseph, Dileepan

    2015-01-01

    An important class of complementary metal-oxide-semiconductor (CMOS) image sensors are those where pixel responses are monotonic nonlinear functions of light stimuli. This class includes various logarithmic architectures, which are easily capable of wide dynamic range imaging, at video rates, but which are vulnerable to image quality issues. To minimize fixed pattern noise (FPN) and maximize photometric accuracy, pixel responses must be calibrated and corrected due to mismatch and process variation during fabrication. Unlike literature approaches, which employ circuit-based models of varying complexity, this paper introduces a novel approach based on low-degree polynomials. Although each pixel may have a highly nonlinear response, an approximately-linear FPN calibration is possible by exploiting the monotonic nature of imaging. Moreover, FPN correction requires only arithmetic, and an optimal fixed-point implementation is readily derived, subject to a user-specified number of bits per pixel. Using a monotonic spline, involving cubic polynomials, photometric calibration is also possible without a circuit-based model, and fixed-point photometric correction requires only a look-up table. The approach is experimentally validated with a logarithmic CMOS image sensor and is compared to a leading approach from the literature. The novel approach proves effective and efficient. PMID:26501287

  6. Automatic Synthesis of CMOS Algorithmic Analog To-Digital Converter.

    NASA Astrophysics Data System (ADS)

    Jusuf, Gani

    The steady decrease in technological feature size is allowing increasing levels of integration in analog/digital interface functions. These functions consist of analog as well as digital circuits. While the turn around time for an all digital IC chip is very short due to the maturity of digital IC computer-aided design (CAD) tools over the last ten years, most analog circuits have to be designed manually due to the lack of analog IC CAD tools. As a result, analog circuit design becomes the bottleneck in the design of mixed signal processing chips. One common analog function in a mixed signal processing chip is an analog-to-digital conversion (ADC) function. This function recurs frequently but with varying performance requirements. The objective of this research is to study the design methodology of a compilation program capable of synthesizing ADC's with a broad range of sampling rates and resolution, and silicon area and performance comparable with the manual approach. The automatic compilation of the ADC function is a difficult problem mainly because ADC techniques span such a wide spectrum of performance, with radically different implementations being optimum for different ranges of conversion range, resolution, and power dissipation. We will show that a proper choice of the ADC architectures and the incorporation of many analog circuit design techniques will simplify the synthesis procedure tremendously. Moreover, in order to speed up the device sizing, hierarchical optimization procedure and behavioral simulation are implemented into the ADC module generation steps. As a result of this study, a new improved algorithmic ADC without the need of high precision comparators has been developed. This type of ADC lends itself to automatic generation due to its modularity, simplicity, small area consumption, moderate speed, low power dissipation, and single parameter trim capability that can be added at high resolution. Furthermore, a performance-driven CMOS ADC module generator, CADICS based on design rules and spice parameters has been developed. CADICS takes a set of input files and generates the complete ADC netlist, layout, and performance summary. A prototype of the automatically generated ADC has also been fabricated and tested.

  7. A Dynamic Range Enhanced Readout Technique with a Two-Step TDC for High Speed Linear CMOS Image Sensors.

    PubMed

    Gao, Zhiyuan; Yang, Congjie; Xu, Jiangtao; Nie, Kaiming

    2015-01-01

    This paper presents a dynamic range (DR) enhanced readout technique with a two-step time-to-digital converter (TDC) for high speed linear CMOS image sensors. A multi-capacitor and self-regulated capacitive trans-impedance amplifier (CTIA) structure is employed to extend the dynamic range. The gain of the CTIA is auto adjusted by switching different capacitors to the integration node asynchronously according to the output voltage. A column-parallel ADC based on a two-step TDC is utilized to improve the conversion rate. The conversion is divided into coarse phase and fine phase. An error calibration scheme is also proposed to correct quantization errors caused by propagation delay skew within -T(clk)~+T(clk). A linear CMOS image sensor pixel array is designed in the 0.13 μm CMOS process to verify this DR-enhanced high speed readout technique. The post simulation results indicate that the dynamic range of readout circuit is 99.02 dB and the ADC achieves 60.22 dB SNDR and 9.71 bit ENOB at a conversion rate of 2 MS/s after calibration, with 14.04 dB and 2.4 bit improvement, compared with SNDR and ENOB of that without calibration. PMID:26561819

  8. A Dynamic Range Enhanced Readout Technique with a Two-Step TDC for High Speed Linear CMOS Image Sensors

    PubMed Central

    Gao, Zhiyuan; Yang, Congjie; Xu, Jiangtao; Nie, Kaiming

    2015-01-01

    This paper presents a dynamic range (DR) enhanced readout technique with a two-step time-to-digital converter (TDC) for high speed linear CMOS image sensors. A multi-capacitor and self-regulated capacitive trans-impedance amplifier (CTIA) structure is employed to extend the dynamic range. The gain of the CTIA is auto adjusted by switching different capacitors to the integration node asynchronously according to the output voltage. A column-parallel ADC based on a two-step TDC is utilized to improve the conversion rate. The conversion is divided into coarse phase and fine phase. An error calibration scheme is also proposed to correct quantization errors caused by propagation delay skew within −Tclk~+Tclk. A linear CMOS image sensor pixel array is designed in the 0.13 μm CMOS process to verify this DR-enhanced high speed readout technique. The post simulation results indicate that the dynamic range of readout circuit is 99.02 dB and the ADC achieves 60.22 dB SNDR and 9.71 bit ENOB at a conversion rate of 2 MS/s after calibration, with 14.04 dB and 2.4 bit improvement, compared with SNDR and ENOB of that without calibration. PMID:26561819

  9. An Ultra-Low Power CMOS Image Sensor with On-Chip Energy Harvesting and Power Management Capability

    PubMed Central

    Cevik, Ismail; Huang, Xiwei; Yu, Hao; Yan, Mei; Ay, Suat U.

    2015-01-01

    An ultra-low power CMOS image sensor with on-chip energy harvesting and power management capability is introduced in this paper. The photodiode pixel array can not only capture images but also harvest solar energy. As such, the CMOS image sensor chip is able to switch between imaging and harvesting modes towards self-power operation. Moreover, an on-chip maximum power point tracking (MPPT)-based power management system (PMS) is designed for the dual-mode image sensor to further improve the energy efficiency. A new isolated P-well energy harvesting and imaging (EHI) pixel with very high fill factor is introduced. Several ultra-low power design techniques such as reset and select boosting techniques have been utilized to maintain a wide pixel dynamic range. The chip was designed and fabricated in a 1.8 V, 1P6M 0.18 m CMOS process. Total power consumption of the imager is 6.53 W for a 96 96 pixel array with 1 V supply and 5 fps frame rate. Up to 30 ?W of power could be generated by the new EHI pixels. The PMS is capable of providing 3 the power required during imaging mode with 50% efficiency allowing energy autonomous operation with a 72.5% duty cycle. PMID:25756863

  10. 324GHz CMOS VCO Using Linear Superimposition Technique

    NASA Technical Reports Server (NTRS)

    Daquan, Huang; LaRocca, Tim R.; Samoska, Lorene A; Fung, Andy; Chang, Frank

    2007-01-01

    Terahertz (frequencies ranged from 300GHz to 3THz) imaging and spectroscopic systems have drawn increasing attention recently due to their unique capabilities in detecting and possibly analyzing concealed objects. The generation of terahertz signals is nonetheless nontrivial and traditionally accomplished by using either free-electron radiation, optical lasers, Gunn diodes or fundamental oscillation by using III-V based HBT/HEMT technology[1-3]... We have substantially extended the operation range of deep-scaled CMOS by using a linear superimposition method, in which we have realized a 324GHz VCO in 90nm digital CMOS with 4GHz tuning range under 1V supply voltage. This may also pave the way for ultra-high data rate wireless communications beyond that of IEEE 802.15.3c and reach data rates comparable to that of fiber optical communications, such as OC768 (40Gbps) and beyond.

  11. On testing stuck-open faults in CMOS combinational circuits

    NASA Technical Reports Server (NTRS)

    Chandramouli, R.

    1982-01-01

    Recently it has been found that a class of failure related to a particular technology (CMOS) cannot be modelled as the conventional stuck-at fault model. These failures change the combinational behavior of CMOS logic gates into a sequential one. Such a failure is modelled as a fault, called the Stuck-Open fault (SOP). The object of this paper is to develop a procedure to detect single SOPs in combinational circuits. It is shown, that in general, tests generated for stuck-at faults when applied in a particular sequence will detect all single SOP faults. In case of single redundancy in the network, the SOP fault on the redundant line cannot be detected. When there is reconvergent fan-out in the network, there is a one-one correspondence between the conditions for stuck-at fault and stuck-open fault detectability.

  12. A CMOS integrated timing discriminator circuit for fast scintillation counters

    SciTech Connect

    Jochmann, M.W.

    1998-06-01

    Based on a zero-crossing discriminator using a CR differentiation network for pulse shaping, a new CMOS integrated timing discriminator circuit is proposed for fast (t{sub r} {ge} 2 ns) scintillation counters at the cooler synchrotron COSY-Juelich. By eliminating the input signal`s amplitude information by means of an analog continuous-time divider, a normalized pulse shape at the zero-crossing point is gained over a wide dynamic input amplitude range. In combination with an arming comparator and a monostable multivibrator this yields in a highly precise timing discriminator circuit, that is expected to be useful in different time measurement applications. First measurement results of a CMOS integrated logarithmic amplifier, which is part of the analog continuous-time divider, agree well with the corresponding simulations. Moreover, SPICE simulations of the integrated discriminator circuit promise a time walk well below 200 ps (FWHM) over a 40 dB input amplitude dynamic range.

  13. A Brief Discussion of Radiation Hardening of CMOS Microelectronics

    SciTech Connect

    Myers, D.R.

    1998-12-18

    Commercial microchips work well in their intended environments. However, generic microchips will not fimction correctly if exposed to sufficient amounts of ionizing radiation, the kind that satellites encounter in outer space. Modern CMOS circuits must overcome three specific concerns from ionizing radiation: total-dose, single-event, and dose-rate effects. Minority-carrier devices such as bipolar transistors, optical receivers, and solar cells must also deal with recombination-generation centers caused by displacement damage, which are not major concerns for majority-carrier CMOS devices. There are ways to make the chips themselves more resistant to radiation. This extra protection, called radiation hardening, has been called both a science and an art. Radiation hardening requires both changing the designs of the chips and altering the ways that the chips are manufactured.

  14. Test of radiation hardness of CMOS transistors under neutron irradiation

    NASA Astrophysics Data System (ADS)

    Sadrozinski, H. F.-W.; Rowe, W. A.; Seiden, A.; Spencer, E.; Hoffman, C. M.; Holtkamp, D.; Kinnison, W. W.; Sommer, W. F.; Ziock, H. J.

    1990-03-01

    We have tested 2 ?m CMOS test structures from various foundries in the LAMPF beam stop for radiation damage under prolonged neutron irradiation. The fluxes employed were higher than the ones expected to be encountered at the SSC and led to fluences of up to 10 15 neutrons/cm 2 in about 500 h of running. We show that test structures which have been measured to survive ionizing radiation of the order of Mrad also survive these high neutron fluences.

  15. Test of radiation hardness of CMOS transistors under neutron irradiation

    NASA Astrophysics Data System (ADS)

    Sadrozinski, H. F. W.; Rowe, W. A.; Seiden, A.; Spencer, E.; Hoffman, C. M.; Holtkamp, D.; Kinnison, W. W.; Sommer, W. F., Jr.; Ziock, H. J.

    We have tested 2 micrometer CMOS test structures from various foundries in the LAMPF Beam stop for radiation damage under prolongued neutron irradiation. The fluxes employed covered the region expected to be encountered at the SSC and led to fluences of up to 10 to the 14th power neutrons/sq cm in about 500 hrs of running. We show that test structures which have been measured to survive ionizing radiation of the order MRad also survive these high neutron fluences.

  16. Attenuation of single event induced pulses in CMOS combinational logic

    SciTech Connect

    Baze, M.P.; Buchner, S.P.

    1997-12-01

    Results are presented of a study of SEU generated transient pulse attenuation in combinational logic structures built using common digital CMOS design practices. SPICE circuit analysis, heavy ion tests, and pulsed, focused laser simulations were used to examine the response characteristics of transient pulse behavior in long logic strings. Results show that while there is an observable effect, it cannot be generally assumed that attenuation will significantly reduce observed circuit bit error rates.

  17. Linear dynamic range enhancement in a CMOS imager

    NASA Technical Reports Server (NTRS)

    Pain, Bedabrata (Inventor)

    2008-01-01

    A CMOS imager with increased linear dynamic range but without degradation in noise, responsivity, linearity, fixed-pattern noise, or photometric calibration comprises a linear calibrated dual gain pixel in which the gain is reduced after a pre-defined threshold level by switching in an additional capacitance. The pixel may include a novel on-pixel latch circuit that is used to switch in the additional capacitance.

  18. An integrated CMOS detection system for optical short-pulse

    NASA Astrophysics Data System (ADS)

    Kim, Chang-Gun; Hong, Nam-Pyo; Choi, Young-Wan

    2014-03-01

    We present design of a front-end readout system consisting of charge sensitive amplifier (CSA) and pulse shaper for detection of stochastic and ultra-small semiconductor scintillator signal. The semiconductor scintillator is double sided silicon detector (DSSD) or avalanche photo detector (APD) for high resolution and peak signal reliability of γ-ray or X-ray spectroscopy. Such system commonly uses low noise multichannel CSA. Each CSA in multichannel includes continuous reset system based on tens of MΩ and charge-integrating capacitor in feedback loop. The high value feedback resistor requires large area and huge power consumption for integrated circuits. In this paper, we analyze these problems and propose a CMOS short pulse detection system with a novel CSA. The novel CSA is composed of continuous reset system with combination of diode connected PMOS and 100 fF. This structure has linearity with increased input charge quantity from tens of femto-coulomb to pico-coulomb. Also, the front-end readout system includes both slow and fast shapers for detecting CSA output and preventing pile-up distortion. Shaping times of fast and slow shapers are 150 ns and 1.4 μs, respectively. Simulation results of the CMOS detection system for optical short-pulse implemented in 0.18 μm CMOS technology are presented.

  19. First result on biased CMOS MAPs-on-diamond devices

    NASA Astrophysics Data System (ADS)

    Kanxheri, K.; Citroni, M.; Fanetti, S.; Lagomarsino, S.; Morozzi, A.; Parrini, G.; Passeri, D.; Sciortino, S.; Servoli, L.

    2015-10-01

    Recently a new type of device, the MAPS-on-diamond, obtained bonding a thinned to 25 ?m CMOS Monolithic Active Pixel Sensor to a standard 500 ?m pCVD diamond substrate, has been proposed and fabricated, allowing a highly segmented readout (1010 ?m pixel size) of the signal produced in the diamond substrate. The bonding between the two materials has been obtained using a new laser technique to deliver the needed energy at the interface. A biasing scheme has been adopted to polarize the diamond substrate to allow the charge transport inside the diamond without disrupting the functionalities of the CMOS Monolithic Active Pixel Sensor. The main concept of this class of devices is the capability of the charges generated in the diamond by ionizing radiation to cross the silicon-diamond interface and to be collected by the MAPS photodiodes. In this work we demonstrate that such passage occurs and measure its overall efficiency. This study has been carried out first calibrating the CMOS MAPS with monochromatic X-rays, and then testing the device with charged particles (electrons) either with and without biasing the diamond substrate, to compare the amount of signal collected.

  20. Development of CMOS Imager Block for Capsule Endoscope

    NASA Astrophysics Data System (ADS)

    Shafie, S.; Fodzi, F. A. M.; Tung, L. Q.; Lioe, D. X.; Halin, I. A.; Hasan, W. Z. W.; Jaafar, H.

    2014-04-01

    This paper presents the development of imager block to be associated in a capsule endoscopy system. Since the capsule endoscope is used to diagnose gastrointestinal diseases, the imager block must be in small size which is comfortable for the patients to swallow. In this project, a small size 1.5V button battery is used as the power supply while the voltage supply requirements for other components such as microcontroller and CMOS image sensor are higher. Therefore, a voltage booster circuit is proposed to boost up the voltage supply from 1.5V to 3.3V. A low power microcontroller is used to generate control pulses for the CMOS image sensor and to convert the 8-bits parallel data output to serial data to be transmitted to the display panel. The results show that the voltage booster circuit was able to boost the voltage supply from 1.5V to 3.3V. The microcontroller precisely controls the CMOS image sensor to produce parallel data which is then serialized again by the microcontroller. The serial data is then successfully translated to 2fps image and displayed on computer.

  1. CMOS integration of inkjet-printed graphene for humidity sensing

    NASA Astrophysics Data System (ADS)

    Santra, S.; Hu, G.; Howe, R. C. T.; de Luca, A.; Ali, S. Z.; Udrea, F.; Gardner, J. W.; Ray, S. K.; Guha, P. K.; Hasan, T.

    2015-11-01

    We report on the integration of inkjet-printed graphene with a CMOS micro-electro-mechanical-system (MEMS) microhotplate for humidity sensing. The graphene ink is produced via ultrasonic assisted liquid phase exfoliation in isopropyl alcohol (IPA) using polyvinyl pyrrolidone (PVP) polymer as the stabilizer. We formulate inks with different graphene concentrations, which are then deposited through inkjet printing over predefined interdigitated gold electrodes on a CMOS microhotplate. The graphene flakes form a percolating network to render the resultant graphene-PVP thin film conductive, which varies in presence of humidity due to swelling of the hygroscopic PVP host. When the sensors are exposed to relative humidity ranging from 10–80%, we observe significant changes in resistance with increasing sensitivity from the amount of graphene in the inks. Our sensors show excellent repeatability and stability, over a period of several weeks. The location specific deposition of functional graphene ink onto a low cost CMOS platform has the potential for high volume, economic manufacturing and application as a new generation of miniature, low power humidity sensors for the internet of things.

  2. CMOS integration of inkjet-printed graphene for humidity sensing

    PubMed Central

    Santra, S.; Hu, G.; Howe, R. C. T.; De Luca, A.; Ali, S. Z.; Udrea, F.; Gardner, J. W.; Ray, S. K.; Guha, P. K.; Hasan, T.

    2015-01-01

    We report on the integration of inkjet-printed graphene with a CMOS micro-electro-mechanical-system (MEMS) microhotplate for humidity sensing. The graphene ink is produced via ultrasonic assisted liquid phase exfoliation in isopropyl alcohol (IPA) using polyvinyl pyrrolidone (PVP) polymer as the stabilizer. We formulate inks with different graphene concentrations, which are then deposited through inkjet printing over predefined interdigitated gold electrodes on a CMOS microhotplate. The graphene flakes form a percolating network to render the resultant graphene-PVP thin film conductive, which varies in presence of humidity due to swelling of the hygroscopic PVP host. When the sensors are exposed to relative humidity ranging from 10–80%, we observe significant changes in resistance with increasing sensitivity from the amount of graphene in the inks. Our sensors show excellent repeatability and stability, over a period of several weeks. The location specific deposition of functional graphene ink onto a low cost CMOS platform has the potential for high volume, economic manufacturing and application as a new generation of miniature, low power humidity sensors for the internet of things. PMID:26616216

  3. CMOS integration of inkjet-printed graphene for humidity sensing.

    PubMed

    Santra, S; Hu, G; Howe, R C T; De Luca, A; Ali, S Z; Udrea, F; Gardner, J W; Ray, S K; Guha, P K; Hasan, T

    2015-01-01

    We report on the integration of inkjet-printed graphene with a CMOS micro-electro-mechanical-system (MEMS) microhotplate for humidity sensing. The graphene ink is produced via ultrasonic assisted liquid phase exfoliation in isopropyl alcohol (IPA) using polyvinyl pyrrolidone (PVP) polymer as the stabilizer. We formulate inks with different graphene concentrations, which are then deposited through inkjet printing over predefined interdigitated gold electrodes on a CMOS microhotplate. The graphene flakes form a percolating network to render the resultant graphene-PVP thin film conductive, which varies in presence of humidity due to swelling of the hygroscopic PVP host. When the sensors are exposed to relative humidity ranging from 10-80%, we observe significant changes in resistance with increasing sensitivity from the amount of graphene in the inks. Our sensors show excellent repeatability and stability, over a period of several weeks. The location specific deposition of functional graphene ink onto a low cost CMOS platform has the potential for high volume, economic manufacturing and application as a new generation of miniature, low power humidity sensors for the internet of things. PMID:26616216

  4. Single photon detection and localization accuracy with an ebCMOS camera

    NASA Astrophysics Data System (ADS)

    Cajgfinger, T.; Dominjon, A.; Barbier, R.

    2015-07-01

    The CMOS sensor technologies evolve very fast and offer today very promising solutions to existing issues facing by imaging camera systems. CMOS sensors are very attractive for fast and sensitive imaging thanks to their low pixel noise (1e-) and their possibility of backside illumination. The ebCMOS group of IPNL has produced a camera system dedicated to Low Light Level detection and based on a 640 kPixels ebCMOS with its acquisition system. After reminding the principle of detection of an ebCMOS and the characteristics of our prototype, we confront our camera to other imaging systems. We compare the identification efficiency and the localization accuracy of a point source by four different photo-detection devices: the scientific CMOS (sCMOS), the Charge Coupled Device (CDD), the Electron Multiplying CCD (emCCD) and the Electron Bombarded CMOS (ebCMOS). Our ebCMOS camera is able to identify a single photon source in less than 10 ms with a localization accuracy better than 1 μm. We report as well efficiency measurement and the false positive identification of the ebCMOS camera by identifying more than hundreds of single photon sources in parallel. About 700 spots are identified with a detection efficiency higher than 90% and a false positive percentage lower than 5. With these measurements, we show that our target tracking algorithm can be implemented in real time at 500 frames per second under a photon flux of the order of 8000 photons per frame. These results demonstrate that the ebCMOS camera concept with its single photon detection and target tracking algorithm is one of the best devices for low light and fast applications such as bioluminescence imaging, quantum dots tracking or adaptive optics.

  5. Scaled CMOS Reliability and Considerations for Spacecraft Systems: Bottom-Up and Top-Down Perspective

    NASA Technical Reports Server (NTRS)

    White, Mark

    2012-01-01

    New space missions will increasingly rely on more advanced technologies because of system requirements for higher performance, particularly in instruments and high-speed processing. Component-level reliability challenges with scaled CMOS in spacecraft systems from a bottom-up perspective have been presented. Fundamental Front-end and Back-end processing reliability issues with more aggressively scaled parts have been discussed. Effective thermal management from system-level to the componentlevel (top-down) is a key element in overall design of reliable systems. Thermal management in space systems must consider a wide range of issues, including thermal loading of many different components, and frequent temperature cycling of some systems. Both perspectives (top-down and bottom-up) play a large role in robust, reliable spacecraft system design.

  6. Design Considerations for CMOS-Integrated Hall-Effect Magnetic Bead Detectors for Biosensor Applications.

    PubMed

    Skucha, K; Gambini, S; Liu, P; Megens, M; Kim, J; Boser, Be

    2013-06-01

    We describe a design methodology for on-chip magnetic bead label detectors based on Hall-effect sensors. Signal errors caused by the label-binding process and other factors that limit the minimum detection area are quantified and adjusted to meet typical assay accuracy standards. The methodology is demonstrated by designing an 8192 element Hall sensor array, implemented in a commercial 0.18 μm CMOS process with single-mask postprocessing. The array can quantify a 1% surface coverage of 2.8 μm beads in 30 seconds with a coefficient of variation of 7.4%. This combination of accuracy and speed makes this technology a suitable detection platform for biological assays based on magnetic bead labels. PMID:25031503

  7. Rapid detection of E. coli bacteria using potassium-sensitive FETs in CMOS.

    PubMed

    Nikkhoo, Nasim; Gulak, P Glenn; Maxwell, Karen

    2013-10-01

    A novel integrated system for the detection of live bacteria in less than 10 minutes is presented. It utilizes the specificity of bacteriophages as biological detection elements with the sensitivity of integrated ion-selective field-effect transistors (ISFETs) implemented in conventional 0.18 μm CMOS with additional post-processes PVC-based potassium-sensitive membrane to provide a rapid, low-cost bacteria detection platform. Experimental methods to cancel ISFET non-idealities as well as data processing techniques to enhance detection capability of the bacteria sensor are demonstrated. Three groups of experimental results are provided using four strains of E. coli with two bacteriophages at two different temperatures. Measurements incorporating positive and negative control experiments are presented that successfully exhibit sensor specificity as well detection capability. PMID:24107977

  8. CMOS Integrated Single Electron Transistor Electrometry (CMOS-SET) circuit design for nanosecond quantum-bit read-out.

    SciTech Connect

    Gurrieri, Thomas M.; Lilly, Michael Patrick; Carroll, Malcolm S.; Levy, James E.

    2008-08-01

    Novel single electron transistor (SET) read-out circuit designs are described. The circuits use a silicon SET interfaced to a CMOS voltage mode or current mode comparator to obtain a digital read-out of the state of the qubit. The design assumes standard submicron (0.35 um) CMOS SOI technology using room temperature SPICE models. Implications and uncertainties related to the temperature scaling of these models to 100mK operation are discussed. Using this technology, the simulations predict a read-out operation speed of approximately Ins and a power dissipation per cell as low as 2nW for single-shot read-out, which is a significant advantage over currently used radio frequency SET (RF-SET) approaches.

  9. A 12-Bit High-Speed Column-Parallel Two-Step Single-Slope Analog-to-Digital Converter (ADC) for CMOS Image Sensors

    PubMed Central

    Lyu, Tao; Yao, Suying; Nie, Kaiming; Xu, Jiangtao

    2014-01-01

    A 12-bit high-speed column-parallel two-step single-slope (SS) analog-to-digital converter (ADC) for CMOS image sensors is proposed. The proposed ADC employs a single ramp voltage and multiple reference voltages, and the conversion is divided into coarse phase and fine phase to improve the conversion rate. An error calibration scheme is proposed to correct errors caused by offsets among the reference voltages. The digital-to-analog converter (DAC) used for the ramp generator is based on the split-capacitor array with an attenuation capacitor. Analysis of the DAC's linearity performance versus capacitor mismatch and parasitic capacitance is presented. A prototype 1024 32 Time Delay Integration (TDI) CMOS image sensor with the proposed ADC architecture has been fabricated in a standard 0.18 ?m CMOS process. The proposed ADC has average power consumption of 128 ?W and a conventional rate 6 times higher than the conventional SS ADC. A high-quality image, captured at the line rate of 15.5 k lines/s, shows that the proposed ADC is suitable for high-speed CMOS image sensors. PMID:25407903

  10. CMOS Imager Has Better Cross-Talk and Full-Well Performance

    NASA Technical Reports Server (NTRS)

    Pain, Bedabrata; Cunningham, Thomas J.

    2011-01-01

    A complementary metal oxide/semiconductor (CMOS) image detector now undergoing development is designed to exhibit less cross-talk and greater full-well capacity than do prior CMOS image detectors of the same type. Imagers of the type in question are designed to operate from low-voltage power supplies and are fabricated by processes that yield device features having dimensions in the deep submicron range. Because of the use of low supply potentials, maximum internal electric fields and depletion widths are correspondingly limited. In turn, these limitations are responsible for increases in cross-talk and decreases in charge-handling capacities. Moreover, for small pixels, lateral depletion cannot be extended. These adverse effects are even more accentuated in a back-illuminated CMOS imager, in which photogenerated charge carriers must travel across the entire thickness of the device. The figure shows a partial cross section of the structure in the device layer of the present developmental CMOS imager. (In a practical imager, the device layer would sit atop either a heavily doped silicon substrate or a thin silicon oxide layer on a silicon substrate, not shown here.) The imager chip is divided into two areas: area C, which contains readout circuits and other electronic circuits; and area I, which contains the imaging (photodetector and photogenerated-charge-collecting) pixel structures. Areas C and I are electrically isolated from each other by means of a trench filled with silicon oxide. The electrical isolation between areas C and I makes it possible to apply different supply potentials to these areas, thereby enabling optimization of the supply potential and associated design features for each area. More specifically, metal oxide semiconductor field-effect transistors (MOSFETs) that are typically included in CMOS imagers now reside in area C and can remain unchanged from established designs and operated at supply potentials prescribed for those designs, while the dopings and the lower supply potentials in area I can be tailored to optimize imager performance. In area I, the device layer includes an n+ -doped silicon layer on which is grown an n-doped silicon layer. A p-doped silicon layer is grown on top of the n -doped layer. The total imaging device thickness is the sum of the thickness of the n+, n, and p layers. A pixel photodiode is formed between a surface n+ implant, a p implant underneath it, the aforementioned p layer, and the n and n+ layers. Adjacent to the diode is a gate for transferring photogenerated charges out of the photodiode and into a floating diffusion formed by an implanted p+ layer on an implanted n-doped region. Metal contact pads are added to the back-side for providing back-side bias.

  11. SPICE Level 3 and BSIM3v3.1 characterization of monolithic integrated CMOS-MEMS devices

    SciTech Connect

    Staple, B.D.; Watts, H.A.; Dyck, C.; Griego, A.P.; Hewlett, F.W.; Smith, J.H.

    1998-08-01

    The monolithic integration of MicroElectroMechanical Systems (MEMS) with the driving, controlling, and signal processing electronics promises to improve the performance of micromechanical devices as well as lower their manufacturing, packaging, and instrumentation costs. Key to this integration is the proper interleaving, combining, and customizing of the manufacturing processes to produce functional integrated micromechanical devices with electronics. The authors have developed a MEMS-first monolithic integrated process that first seals the micromechanical devices in a planarized trench and then builds the electronics in a conventional CMOS process. To date, most of the research published on this technology has focused on the performance characteristics of the mechanical portion of the devices, with little information on the attributes of the accompanying electronics. This work attempts to reduce this information void by presenting the results of SPICE Level 3 and BSIM3v3.1 model parameters extracted for the CMOS portion of the MEMS-first process. Transistor-level simulations of MOSFET current, capacitance, output resistance, and transconductance versus voltage using the extracted model parameters closely match the measured data. Moreover, in model validation efforts, circuit-level simulation values for the average gate propagation delay in a 101-stage ring oscillator are within 13--18% of the measured data. In general, the BSIM3v3.1 models provide improved accuracy over the SPICE Level 3 models. These results establish the following: (1) the MEMS-first approach produces functional CMOS devices integrated on a single chip with MEMS devices and (2) the devices manufactured in the approach have excellent transistor characteristics. Thus, the MEMS-first approach renders a solid technology foundation for customers designing in the technology.

  12. Control of organic contamination in CMOS manufacturing

    NASA Astrophysics Data System (ADS)

    Buegler, Juergen H.; Frickinger, J.; Zielonka, G.; Pfitzner, Lothar; Ryssel, Heiner; Schottler, M.

    2001-04-01

    Yield control in manufacturing of microelectronic devices is closely related to defect control and contamination control. For a proper definition of process windows, e.g. maximum sit time or minimum quality of used process materials, the impact of different kinds of contamination on device performance has to be determined. This paper describes the outline of a strategy that was used for an estimation of the impact of organic airborne molecular contamination (AMC) on a realistic device process on the basis of selected experimental results: A manufacturing process was performed using intentionally contaminated substrates, monitoring measures were installed and baseline-levels were determined, time-dependent effects were detected, and process windows were defined on the basis of calculations. A gate-oxide integrity test was performed using intentionally contaminated silicon wafers. Contamination was performed via the gas phase using individual organic compounds. This test indicates that, besides the overall concentration of organic airborne molecular contamination, also the additional presence of small amounts of individual organic compounds has an effect on gate-oxide quality. The installation of measures for the monitoring of organic contamination using Gas-Chromatography/Mass-Spectrometry (GC/MS) or Time-of-Flight -- Secondary-Ion-Mass-Spectrometry (ToF-SIMS) lead to the observation that the deposition of organic contamination onto wafer surfaces can be a very fast process. Especially the preparation of blank samples is a procedure which is complicated by this effect. For an adequate definition of process windows it is necessary to estimate the time that remains until a freshly cleaned wafer is covered by a monolayer or organic contamination. This estimation was made on the basis of calculations using gas kinetic theory. Under standard cleanroom conditions the calculated time is in the range of minutes and is strongly depending on the adsorption probability of individual organic compounds and their individual concentrations.

  13. Multi-channel measurement for hetero-core optical fiber sensor by using CMOS camera

    NASA Astrophysics Data System (ADS)

    Koyama, Yuya; Nishiyama, Michiko; Watanabe, Kazuhiro

    2015-07-01

    Fiber optic smart structures have been developed over several decades by the recent fiber optic sensor technology. Optical intensity-based sensors, which use LD or LEDs, can be suitable for the monitor system to be simple and cost effective. In this paper, a novel fiber optic smart structure with human-like perception has been demonstrated by using intensity-based hetero-core optical fiber sensors system with the CMOS detector. The optical intensity from the hetero-core optical fiber bend sensor is obtained as luminance spots indicated by the optical power distributions. A number of optical intensity spots are simultaneously readout by taking a picture of luminance pattern. To recognize the state of fiber optic smart structure with the hetero-core optical fibers, the template matching process is employed with Sum of Absolute Differences (SAD). A fiber optic smart glove having five optic fiber nerves have been employed to monitor hand postures. Three kinds of hand postures have been recognized by means of the template matching process. A body posture monitoring has also been developed by placing the wearable hetero-core optical fiber bend sensors on the body segments. In order for the CMOS system to be a human brain-like, the luminescent spots in the obtained picture were arranged to make the pattern corresponding to the position of body segments. As a result, it was successfully demonstrated that the proposed fiber optic smart structure could recognize eight kinds of body postures. The developed system will give a capability of human brain-like processing to the existing fiber optic smart structures.

  14. Mobility Enhancement Technology for Scaling of CMOS Devices: Overview and Status

    NASA Astrophysics Data System (ADS)

    Song, Yi; Zhou, Huajie; Xu, Qiuxia; Luo, Jun; Yin, Haizhou; Yan, Jiang; Zhong, Huicai

    2011-07-01

    The aggressive downscaling of complementary metal-oxide-semiconductor (CMOS) technology to the sub-21-nm technology node is facing great challenges. Innovative technologies such as metal gate/high- k dielectric integration, source/drain engineering, mobility enhancement technology, new device architectures, and enhanced quasiballistic transport channels serve as possible solutions for nanoscaled CMOS. Among them, mobility enhancement technology is one of the most promising solutions for improving device performance. Technologies such as global and process-induced strain technology, hybrid-orientation channels, and new high-mobility channels are thoroughly discussed from the perspective of technological innovation and achievement. Uniaxial strain is superior to biaxial strain in extending metal-oxide-semiconductor field-effect transistor (MOSFET) scaling for various reasons. Typical uniaxial technologies, such as embedded or raised SiGe or SiC source/drains, Ge pre-amorphization source/drain extension technology, the stress memorization technique (SMT), and tensile or comprehensive capping layers, stress liners, and contact etch-stop layers (CESLs) are discussed in detail. The initial integration of these technologies and the associated reliability issues are also addressed. The hybrid-orientation channel is challenging due to the complicated process flow and the generation of defects. Applying new high-mobility channels is an attractive method for increasing carrier mobility; however, it is also challenging due to the introduction of new material systems. New processes with new substrates either based on hybrid orientation or composed of group III-V semiconductors must be simplified, and costs should be reduced. Different mobility enhancement technologies will have to be combined to boost device performance, but they must be compatible with each other. The high mobility offered by mobility enhancement technologies makes these technologies promising and an active area of device research down to the 21-nm technology node and beyond.

  15. Inverse lithography technique for advanced CMOS nodes

    NASA Astrophysics Data System (ADS)

    Villaret, Alexandre; Tritchkov, Alexander; Entradas, Jorge; Yesilada, Emek

    2013-04-01

    Resolution Enhancement Techniques have continuously improved over the last decade, driven by the ever growing constraints of lithography process. Despite the large number of RET applied, some hotspot configurations remain challenging for advanced nodes due to aggressive design rules. Inverse Lithography Technique (ILT) is evaluated here as a substitute to the dense OPC baseline. Indeed ILT has been known for several years for its near-to-ideal mask quality, while also being potentially more time consuming in terms of OPC run and mask processing. We chose to evaluate Mentor Graphics' ILT engine "pxOPCTM" on both lines and via hotspot configurations. These hotspots were extracted from real 28nm test cases where the dense OPC solution is not satisfactory. For both layer types, the reference OPC consists of a dense OPC engine coupled to rule-based and/or model-based assist generation method. The same CM1 model is used for the reference and the ILT OPC. ILT quality improvement is presented through Optical Rule Check (ORC) results with various adequate detectors. Several mask manufacturing rule constraints (MRC) are considered for the ILT solution and their impact on process ability is checked after mask processing. A hybrid OPC approach allowing localized ILT usage is presented in order to optimize both quality and runtime. A real mask is prepared and fabricated with this method. Finally, results analyzed on silicon are presented to compare localized ILT to reference dense OPC.

  16. Optical scanning tests of complex CMOS microcircuits

    NASA Technical Reports Server (NTRS)

    Levy, M. E.; Erickson, J. J.

    1977-01-01

    The new test method was based on the use of a raster-scanned optical stimulus in combination with special electrical test procedures. The raster-scanned optical stimulus was provided by an optical spot scanner, an instrument that combines a scanning optical microscope with electronic instrumentation to process and display the electric photoresponse signal induced in a device that is being tested.

  17. A tunable CMOS constant current source

    NASA Technical Reports Server (NTRS)

    Thelen, D.

    1991-01-01

    A constant current source has been designed which makes use of on chip electrically erasable memory to adjust the magnitude and temperature coefficient of the output current. The current source includes a voltage reference based on the difference between enhancement and depletion transistor threshold voltages. Accuracy is +/- 3% over the full range of power supply, process variations, and temperature using eight bits for tuning.

  18. A quadruple well CMOS MAPS prototype for the Layer0 of the SuperB SVT

    NASA Astrophysics Data System (ADS)

    Zucca, S.; Ratti, L.; Traversi, G.; Morsani, F.; Gabrielli, A.; Giorgi, F.

    2013-08-01

    The chip prototype Apsel4well, including monolithic active pixel sensors (MAPS), is meant as an upgrade solution for the Layer0 of the SuperB silicon vertex tracker. The design is based on a 180 nm CMOS process with quadruple well called INMAPS. This technology makes it possible to overcome the main drawbacks of three transistor MAPS. Moreover, the presence of a high resistivity epitaxial layer is expected to lead to a further improvement in terms of charge collection performance and radiation resistance. This work introduces the channel readout design features of the chip Apsel4well developed with the mentioned approach and shows results of device simulations of a 33 pixel matrix.

  19. Micro-Organism-on-Chip: Emerging Direct-Write CMOS-Based Platform for Biological Applications.

    PubMed

    Ghafar-Zadeh, E; Sawan, M; Chodavarapu, V P

    2009-08-01

    We describe the emerging applications of direct-write CMOS-based lab-on-chip which consists of capacitive sensors integrated with microfluidic structures. The microfluidic components are implemented through direct-write microfabrication process (DWFP) on a variety of substrates including integrated circuits. We put forward the recent advances of DWFP for different applications while our focus is placed on biological testing through a novel on-chip capacitive measurement method. We thereafter reveal the viability of this approach for biosensing purposes by demonstrating and discussing the experimental results on micro-organisms. These results are in full agreement with the bio-interface model and other features presented throughout the paper. PMID:23853242

  20. Two-phase low-power analogue CMOS peak detector with high dynamic range

    NASA Astrophysics Data System (ADS)

    Malankin, E.

    2016-02-01

    A low-power two-phase peak detector with wide dynamic range was developed. The PD was designed on the basis ofthe CMOS UMC 180 nm process. This block is considered as a part of the read-out electronics of the CBM experiment at upcoming FAIR accelerator (Germany). Peak detector has the following advantages: wide dynamic range of 5 - 1000 mV, low power consumption of 500 µW. The designed PD meets the requirements to the muon chamber read-out electronics of the CBM experiment. Due to the area efficiency (100×90 μm2) and low power consumption it can be used in different applications for high-energy physics read-out electronics.