Science.gov

Sample records for n-well cmos process

  1. P-well or N-well CMOS technology for advanced SEU-hard SRAMs

    SciTech Connect

    Fu, J.S.

    1988-01-01

    The decoupling resistances required for SEU hardening CMOS SRAMs of the 2..mu..m p-well and n-well technologies are compared. An advanced device-plus-circuit simulator has been used to illuminate the underpinings of why one technology is intrinsically more SEU tolerant than the other. 3 refs., 5 figs.

  2. Carbon Nanotube Integration with a CMOS Process

    PubMed Central

    Perez, Maximiliano S.; Lerner, Betiana; Resasco, Daniel E.; Pareja Obregon, Pablo D.; Julian, Pedro M.; Mandolesi, Pablo S.; Buffa, Fabian A.; Boselli, Alfredo; Lamagna, Alberto

    2010-01-01

    This work shows the integration of a sensor based on carbon nanotubes using CMOS technology. A chip sensor (CS) was designed and manufactured using a 0.30 μm CMOS process, leaving a free window on the passivation layer that allowed the deposition of SWCNTs over the electrodes. We successfully investigated with the CS the effect of humidity and temperature on the electrical transport properties of SWCNTs. The possibility of a large scale integration of SWCNTs with CMOS process opens a new route in the design of more efficient, low cost sensors with high reproducibility in their manufacture. PMID:22319330

  3. End-of-fabrication CMOS process monitor

    NASA Technical Reports Server (NTRS)

    Buehler, M. G.; Allen, R. A.; Blaes, B. R.; Hannaman, D. J.; Lieneweg, U.; Lin, Y.-S.; Sayah, H. R.

    1990-01-01

    A set of test 'modules' for verifying the quality of a complementary metal oxide semiconductor (CMOS) process at the end of the wafer fabrication is documented. By electrical testing of specific structures, over thirty parameters are collected characterizing interconnects, dielectrics, contacts, transistors, and inverters. Each test module contains a specification of its purpose, the layout of the test structure, the test procedures, the data reduction algorithms, and exemplary results obtained from 3-, 2-, or 1.6-micrometer CMOS/bulk processes. The document is intended to establish standard process qualification procedures for Application Specific Integrated Circuits (ASIC's).

  4. The effect of layout topology on single-event transient pulse quenching in a 65 nm bulk CMOS process.

    SciTech Connect

    Ball, D. R.; Ahlbin, Jonathan R.; Gadlage, Matthew J.; Massengill, Lloyd W.; Witulski, A. W.; Reed, R. A.; Vizkelethy, Gyorgy; Bhuva, Bharat L.

    2010-07-01

    Heavy-ion microbeam and broadbeam data are presented for a 65 nm bulk CMOS process showing the existence of pulse quenching at normal and angular incidence for designs where the pMOS transistors are in common n-wells or isolated in separate n-wells. Experimental data and simulations show that pulse quenching is more prevalent in the common n-well design than the separate n-well design, leading to significantly reduced SET pulsewidths and SET cross-section in the common n-well design.

  5. A Standard CMOS Humidity Sensor without Post-Processing

    PubMed Central

    Nizhnik, Oleg; Higuchi, Kohei; Maenaka, Kazusuke

    2011-01-01

    A 2 μW power dissipation, voltage-output, humidity sensor accurate to 5% relative humidity was developed using the LFoundry 0.15 μm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a Intervia Photodielectric 8023–10 humidity-sensitive layer, and a CMOS capacitance to voltage converter. PMID:22163949

  6. Fabrication of the planar angular rotator using the CMOS process

    NASA Astrophysics Data System (ADS)

    Dai, Ching-Liang; Chang, Chien-Liu; Chen, Hung-Lin; Chang, Pei-Zen

    2002-05-01

    In this investigation we propose a novel planar angular rotator fabricated by the conventional complementary metal-oxide semiconductor (CMOS) process. Following the 0.6 μm single poly triple metal (SPTM) CMOS process, the device is completed by a simple maskless, post-process etching step. The rotor of the planar angular rotator rotates around its geometric center with electrostatic actuation. The proposed design adopts an intelligent mechanism including the slider-crank system to permit simultaneous motion. The CMOS planar angular rotator could be driven with driving voltages of around 40 V. The design proposed here has a shorter response time and longer life, without problems of friction and wear, compared to the more common planar angular micromotor.

  7. IGBT scaling principle toward CMOS compatible wafer processes

    NASA Astrophysics Data System (ADS)

    Tanaka, Masahiro; Omura, Ichiro

    2013-02-01

    A scaling principle for trench gate IGBT is proposed. CMOS technology on large diameter wafer enables to produce various digital circuits with higher performance and lower cost. The transistor cell structure becomes laterally smaller and smaller and vertically shallower and shallower. In contrast, latest IGBTs have rather deeper trench structure to obtain lower on-state voltage drop and turn-off loss. In the aspect of the process uniformity and wafer warpage, manufacturing such structure in the CMOS factory is difficult. In this paper, we show the scaling principle toward shallower structure and better performance. The principle is theoretically explained by our previously proposed "Structure Oriented" analytical model. The principle represents a possibility of technology direction and roadmap for future IGBT for improving the device performance consistent with lower cost and high volume productivity with CMOS compatible large diameter wafer technologies.

  8. A CCD/CMOS process for integrated image acquisition and early vision signal processing

    NASA Astrophysics Data System (ADS)

    Keast, Craig L.; Sodini, Charles G.

    The development of technology which integrates a four phase, buried-channel CCD in an existing 1.75 micron CMOS process is described. The four phase clock is employed in the integrated early vision system to minimize process complexity. Signal corruption is minimized and lateral fringing fields are enhanced by burying the channel. The CMOS process for CCD enhancement is described, which highlights a new double-poly process and the buried channel, and the integration is outlined. The functionality and transfer efficiency of the process enhancement were appraised by measuring CCD shift registers at 100 kHz. CMOS measurement results are presented, which include threshold voltages, poly-to-poly capacitor voltage and temperature coefficients, and dark current. A CCD/CMOS processor is described which combines smoothing and segmentation operations. The integration of the CCD and the CMOS processes is found to function due to the enhancement-compatible design of the CMOS process and the thorough employment of CCD module baseline process steps.

  9. CMOS prototype for retinal prosthesis applications with analog processing

    NASA Astrophysics Data System (ADS)

    Castillo-Cabrera, G.; García-Lamont, J.; Reyes-Barranca, M. A.; Matsumoto-Kuwabara, Y.; Moreno-Cadenas, J. A.; Flores-Nava, L. M.

    2014-12-01

    A core architecture for analog processing, which emulates a retina's receptive field, is presented in this work. A model was partially implemented and built on CMOS standard technology through MOSIS. It considers that the receptive field is the basic unit for image processing in the visual system. That is why the design is concerned on a partial solution of receptive field properties in order to be adapted in the future as an aid to people with retinal diseases. A receptive field is represented by an array of 3×3 pixels. Each pixel carries out a process based on four main operations. This means that image processing is developed at pixel level. Operations involved are: (1) photo-transduction by photocurrent integration, (2) signal averaging from eight neighbouring pixels executed by a neu-NMOS (ν-NMOS) neuron, (3) signal average gradient between central pixel and the average value from the eight neighbouring pixels (this gradient is performed by a comparator) and finally (4) a pulse generator. Each one of these operations gives place to circuital blocks which were built on 0.5 μm CMOS technology.

  10. Self-Calibrated Humidity Sensor in CMOS without Post-Processing

    PubMed Central

    Nizhnik, Oleg; Higuchi, Kohei; Maenaka, Kazusuke

    2012-01-01

    A 1.1 μW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 μm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humidity-sensitive layer of Intervia Photodielectric 8023D-10, a CMOS capacitance to voltage converter, and the self-calibration circuitry. PMID:22368466

  11. Interferometric metrology of wafer nanotopography for advanced CMOS process integration

    NASA Astrophysics Data System (ADS)

    Valley, John F.; Koliopoulos, Chris L.; Tang, Shouhong

    2001-12-01

    According to industry standards (SEMI M43, Guide for Reporting Wafer Nanotopography), Nanotopography is the non- planar deviation of the whole front wafer surface within a spatial wavelength range of approximately 0.2 to 20 mm and within the fixed quality area (FQA). The need for precision metrology of wafer nanotopography is being actively addressed by interferometric technology. In this paper we present an approach to mapping the whole wafer front surface nanotopography using an engineered coherence interferometer. The interferometer acquires a whole wafer raw topography map. The raw map is then filtered to remove the long spatial wavelength, high amplitude shape contributions and reveal the nanotopography in the filtered map. Filtered maps can be quantitatively analyzed in a variety of ways to enable statistical process control (SPC) of nanotopography parameters. The importance of tracking these parameters for CMOS gate level processes at 180-nm critical dimension, and below, is examined.

  12. Development of a radiation-hard CMOS process

    NASA Technical Reports Server (NTRS)

    Power, W. L.

    1983-01-01

    It is recommended that various techniques be investigated which appear to have the potential for improving the radiation hardness of CMOS devices for prolonged space flight mission. The three key recommended processing techniques are: (1) making the gate oxide thin. It has been shown that radiation degradation is proportional to the cube of oxide thickness so that a relatively small reduction in thickness can greatly improve radiation resistance; (2) cleanliness and contamination control; and (3) to investigate different oxide growth (low temperature dry, TCE and HCL). All three produce high quality clean oxides, which are more radiation tolerant. Technique 2 addresses the reduction of metallic contamination. Technique 3 will produce a higher quality oxide by using slow growth rate conditions, and will minimize the effects of any residual sodium contamination through the introduction of hydrogen and chlorine into the oxide during growth.

  13. Monolithic integration of high bandwidth waveguide coupled Ge photodiode in a photonic BiCMOS process

    NASA Astrophysics Data System (ADS)

    Lischke, S.; Knoll, D.; Zimmermann, L.

    2015-03-01

    Monolithic integration of photonic functionality in the frontend-of-line (FEOL) of an advanced microelectronics technology is a key step towards future communication applications. This combines photonic components such as waveguides, couplers, modulators, and photo detectors with high-speed electronics plus shortest possible interconnects crucial for high-speed performance. Integration of photonics into CMOS FEOL is therefore in development for quite some time reaching 90nm node recently [1]. However, an alternative to CMOS is high-performance BiCMOS, offering significant advantages for integrated photonics-electronics applications with regard to cost and RF performance. We already presented results of FEOL integration of photonic components in a high-performance SiGe:C BiCMOS baseline to establish a novel, photonic BiCMOS process. Process cornerstone is a local-SOI approach which allows us to fabricate SOI-based, thus low-loss photonic components in a bulk BiCMOS environment [2]. A monolithically integrated 10Gbit/sec Silicon modulator with driver was shown here [3]. A monolithically integrated 25Gbps receiver was presented in [4], consisting of 200GHz bipolar transistors and CMOS devices, low-loss waveguides, couplers, and highspeed Ge photo diodes showing 3-dB bandwidth of 35GHz, internal responsivity of more than 0.6A/W at λ= 1.55μm, and ~ 50nA dark current at 1V. However, the BiCMOS-given thermal steps cause a significant smearing of the Germanium photo diodes doping profile, limiting the photo diode performance. Therefore, we introduced implantation of non-doping elements to overcome such limiting factors, resulting in photo diode bandwidths of more than 50GHz even under the effect of thermal steps necessary when the diodes are integrated in a high performance BiCMOS process.

  14. Advanced Simulation Technology to Design Etching Process on CMOS Devices

    NASA Astrophysics Data System (ADS)

    Kuboi, Nobuyuki

    2015-09-01

    Prediction and control of plasma-induced damage is needed to mass-produce high performance CMOS devices. In particular, side-wall (SW) etching with low damage is a key process for the next generation of MOSFETs and FinFETs. To predict and control the damage, we have developed a SiN etching simulation technique for CHxFy/Ar/O2 plasma processes using a three-dimensional (3D) voxel model. This model includes new concepts for the gas transportation in the pattern, detailed surface reactions on the SiN reactive layer divided into several thin slabs and C-F polymer layer dependent on the H/N ratio, and use of ``smart voxels''. We successfully predicted the etching properties such as the etch rate, polymer layer thickness, and selectivity for Si, SiO2, and SiN films along with process variations and demonstrated the 3D damage distribution time-dependently during SW etching on MOSFETs and FinFETs. We confirmed that a large amount of Si damage was caused in the source/drain region with the passage of time in spite of the existing SiO2 layer of 15 nm in the over etch step and the Si fin having been directly damaged by a large amount of high energy H during the removal step of the parasitic fin spacer leading to Si fin damage to a depth of 14 to 18 nm. By analyzing the results of these simulations and our previous simulations, we found that it is important to carefully control the dose of high energy H, incident energy of H, polymer layer thickness, and over-etch time considering the effects of the pattern structure, chamber-wall condition, and wafer open area ratio. In collaboration with Masanaga Fukasawa and Tetsuya Tatsumi, Sony Corporation. We thank Mr. T. Shigetoshi and Mr. T. Kinoshita of Sony Corporation for their assistance with the experiments.

  15. High-voltage CMOS detectors

    NASA Astrophysics Data System (ADS)

    Ehrler, F.; Blanco, R.; Leys, R.; Perić, I.

    2016-07-01

    High-voltage CMOS (HVCMOS) pixel sensors are depleted active pixel sensors implemented in standard commercial CMOS processes. The sensor element is the n-well/p-substrate diode. The sensor electronics are entirely placed inside the n-well which is at the same time used as the charge collection electrode. High voltage is used to deplete the part of the substrate around the n-well. HVCMOS sensors allow implementation of complex in-pixel electronics. This, together with fast signal collection, allows a good time resolution, which is required for particle tracking in high energy physics. HVCMOS sensors will be used in Mu3e experiment at PSI and are considered as an option for both ATLAS and CLIC (CERN). Radiation tolerance and time walk compensation have been tested and results are presented.

  16. Integration of complex optical functionality in a production CMOS process

    NASA Astrophysics Data System (ADS)

    Gunn, Lawrence C., III

    Optical functionality has been developed within the confines of an existing CMOS process. As of this writing, 10Gigabit modulators, electrically tunable optical filters, waveguides, and grating coupler technology have been successfully implemented alongside the existing transistors in the Freescale Hip7SOI process. This technology will be used to manufacture high bandwidth optical interconnections directly on silicon chips, allowing a new type of network and computing infrastructure to be developed. This work is covered in two distinct phases. First, the exploratory work done to gain experience with high index contrast silicon waveguides primarily served to uncover challenges related with simulation of these devices, and with the practical limitations of efficiently coupling the resulting waveguide devices with the outside world. The second phase began as the grating coupler emerged to address the coupling challenge. It became feasible to conceive of a commercially viable technology based on silicon photonics. The coupler has been evolved to a high level, currently achieving coupling loss of less than 1dB. Once the light is on chip, filtering and modulation technology are implemented. The reverse-biased plasma dispersion modulator has a 3dB roll-off of 10GHz, and an insertion loss less than 5dB. Optical filters based on ring resonators, arrayed waveguide gratings, and interleavers have all been implemented, often with world record performance, and many of the devices have been made electronically tunable to compensate for manufacturing variations and environmental excursions. Finally, circuitry has been designed and constructed on the same die with the optical functionality, fully demonstrating the ability to achieve monolithic integration of these devices.

  17. Overview of CMOS process and design options for image sensor dedicated to space applications

    NASA Astrophysics Data System (ADS)

    Martin-Gonthier, P.; Magnan, P.; Corbiere, F.

    2005-10-01

    With the growth of huge volume markets (mobile phones, digital cameras...) CMOS technologies for image sensor improve significantly. New process flows appear in order to optimize some parameters such as quantum efficiency, dark current, and conversion gain. Space applications can of course benefit from these improvements. To illustrate this evolution, this paper reports results from three technologies that have been evaluated with test vehicles composed of several sub arrays designed with some space applications as target. These three technologies are CMOS standard, improved and sensor optimized process in 0.35μm generation. Measurements are focussed on quantum efficiency, dark current, conversion gain and noise. Other measurements such as Modulation Transfer Function (MTF) and crosstalk are depicted in [1]. A comparison between results has been done and three categories of CMOS process for image sensors have been listed. Radiation tolerance has been also studied for the CMOS improved process in the way of hardening the imager by design. Results at 4, 15, 25 and 50 krad prove a good ionizing dose radiation tolerance applying specific techniques.

  18. Advanced simulation technology for etching process design for CMOS device applications

    NASA Astrophysics Data System (ADS)

    Kuboi, Nobuyuki; Fukasawa, Masanaga; Tatsumi, Tetsuya

    2016-07-01

    Plasma etching is a critical process for the realization of high performance in the next generation of CMOS devices. To predict and control fluctuations in the etching properties accurately during mass production, it is essential that etching process simulation technology considers fluctuations in the plasma chamber wall conditions, the effects of by-products on the critical dimensions, the Si recess dependence on the wafer open area ratio and local pattern structure, and the time-dependent plasma-induced damage distribution associated with the three-dimensional feature scale profile at the 100 nm level. This consideration can overcome the issues with conventional simulations performed under the assumed ideal conditions, which are not accurate enough for practical process design. In this article, these advanced process simulation technologies are reviewed, and, from the results of suitable process simulations, a new etching system that automatically controls the etching properties is proposed to enable stable CMOS device fabrication with high yields.

  19. Micro-electro-mechanical bandpass filters for signal processing by standard CMOS process

    NASA Astrophysics Data System (ADS)

    Huang, Tsungwei; Chang, Peizen; Lee, ChiYuan; Xiao, Fuyuan

    2000-06-01

    This investigation fabricates a laminated-suspension microelectromechanical filter by a fully compatible CMOS process. Experimentally, due to the top metal layer begin used as the etch-resistant mask during the subsequent dry etching. Therefore, this study performs maskless etching with plasma and obtains excellent result including high selectivity and full release of the structure. Additionally, the MEMS filter can be driven by applying low-voltage of around 5 volts and a measured center frequency of around 13.1kHz and a quality factor of around 1871 were obtained for a single-comb resonator operate din air. The filter proposed herein has a monolithic integration capability with the relative electric circuits.

  20. Efficient Smart CMOS Camera Based on FPGAs Oriented to Embedded Image Processing

    PubMed Central

    Bravo, Ignacio; Baliñas, Javier; Gardel, Alfredo; Lázaro, José L.; Espinosa, Felipe; García, Jorge

    2011-01-01

    This article describes an image processing system based on an intelligent ad-hoc camera, whose two principle elements are a high speed 1.2 megapixel Complementary Metal Oxide Semiconductor (CMOS) sensor and a Field Programmable Gate Array (FPGA). The latter is used to control the various sensor parameter configurations and, where desired, to receive and process the images captured by the CMOS sensor. The flexibility and versatility offered by the new FPGA families makes it possible to incorporate microprocessors into these reconfigurable devices, and these are normally used for highly sequential tasks unsuitable for parallelization in hardware. For the present study, we used a Xilinx XC4VFX12 FPGA, which contains an internal Power PC (PPC) microprocessor. In turn, this contains a standalone system which manages the FPGA image processing hardware and endows the system with multiple software options for processing the images captured by the CMOS sensor. The system also incorporates an Ethernet channel for sending processed and unprocessed images from the FPGA to a remote node. Consequently, it is possible to visualize and configure system operation and captured and/or processed images remotely. PMID:22163739

  1. Efficient smart CMOS camera based on FPGAs oriented to embedded image processing.

    PubMed

    Bravo, Ignacio; Baliñas, Javier; Gardel, Alfredo; Lázaro, José L; Espinosa, Felipe; García, Jorge

    2011-01-01

    This article describes an image processing system based on an intelligent ad-hoc camera, whose two principle elements are a high speed 1.2 megapixel Complementary Metal Oxide Semiconductor (CMOS) sensor and a Field Programmable Gate Array (FPGA). The latter is used to control the various sensor parameter configurations and, where desired, to receive and process the images captured by the CMOS sensor. The flexibility and versatility offered by the new FPGA families makes it possible to incorporate microprocessors into these reconfigurable devices, and these are normally used for highly sequential tasks unsuitable for parallelization in hardware. For the present study, we used a Xilinx XC4VFX12 FPGA, which contains an internal Power PC (PPC) microprocessor. In turn, this contains a standalone system which manages the FPGA image processing hardware and endows the system with multiple software options for processing the images captured by the CMOS sensor. The system also incorporates an Ethernet channel for sending processed and unprocessed images from the FPGA to a remote node. Consequently, it is possible to visualize and configure system operation and captured and/or processed images remotely. PMID:22163739

  2. Respiration detection chip with integrated temperature-insensitive MEMS sensors and CMOS signal processing circuits.

    PubMed

    Wei, Chia-Ling; Lin, Yu-Chen; Chen, Tse-An; Lin, Ren-Yi; Liu, Tin-Hao

    2015-02-01

    An airflow sensing chip, which integrates MEMS sensors with their CMOS signal processing circuits into a single chip, is proposed for respiration detection. Three micro-cantilever-based airflow sensors were designed and fabricated using a 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Two main differences were present among these three designs: they were either metal-covered or metal-free structures, and had either bridge-type or fixed-type reference resistors. The performances of these sensors were measured and compared, including temperature sensitivity and airflow sensitivity. Based on the measured results, the metal-free structure with fixed-type reference resistors is recommended for use, because it has the highest airflow sensitivity and also can effectively reduce the output voltage drift caused by temperature change. PMID:24956395

  3. Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array

    PubMed Central

    López-Huerta, Francisco; Herrera-May, Agustín L.; Estrada-López, Johan J.; Zuñiga-Islas, Carlos; Cervantes-Sanchez, Blanca; Soto, Enrique; Soto-Cruz, Blanca S.

    2011-01-01

    We present an alternative post-processing on a CMOS chip to release a planar microelectrode array (pMEA) integrated with its signal readout circuit, which can be used for monitoring the neuronal activity of vestibular ganglion neurons in newborn Wistar strain rats. This chip is fabricated through a 0.6 μm CMOS standard process and it has 12 pMEA through a 4 × 3 electrodes matrix. The alternative CMOS post-process includes the development of masks to protect the readout circuit and the power supply pads. A wet etching process eliminates the aluminum located on the surface of the p+-type silicon. This silicon is used as transducer for recording the neuronal activity and as interface between the readout circuit and neurons. The readout circuit is composed of an amplifier and tunable bandpass filter, which is placed on a 0.015 mm2 silicon area. The tunable bandpass filter has a bandwidth of 98 kHz and a common mode rejection ratio (CMRR) of 87 dB. These characteristics of the readout circuit are appropriate for neuronal recording applications. PMID:22346681

  4. Parallel-Processing CMOS Circuitry for M-QAM and 8PSK TCM

    NASA Technical Reports Server (NTRS)

    Gray, Andrew; Lee, Dennis; Hoy, Scott; Fisher, Dave; Fong, Wai; Ghuman, Parminder

    2009-01-01

    There has been some additional development of parts reported in "Multi-Modulator for Bandwidth-Efficient Communication" (NPO-40807), NASA Tech Briefs, Vol. 32, No. 6 (June 2009), page 34. The focus was on 1) The generation of M-order quadrature amplitude modulation (M-QAM) and octonary-phase-shift-keying, trellis-coded modulation (8PSK TCM), 2) The use of square-root raised-cosine pulse-shaping filters, 3) A parallel-processing architecture that enables low-speed [complementary metal oxide/semiconductor (CMOS)] circuitry to perform the coding, modulation, and pulse-shaping computations at a high rate; and 4) Implementation of the architecture in a CMOS field-programmable gate array.

  5. Analog CMOS design for optical coherence tomography signal detection and processing.

    PubMed

    Xu, Wei; Mathine, David L; Barton, Jennifer K

    2008-02-01

    A CMOS circuit was designed and fabricated for optical coherence tomography (OCT) signal detection and processing. The circuit includes a photoreceiver, differential gain stage and lock-in amplifier based demodulator. The photoreceiver consists of a CMOS photodetector and low noise differential transimpedance amplifier which converts the optical interference signal into a voltage. The differential gain stage further amplifies the signal. The in-phase and quadrature channels of the lock-in amplifier each include an analog mixer and switched-capacitor low-pass filter with an external mixer reference signal. The interferogram envelope and phase can be extracted with this configuration, enabling Doppler OCT measurements. A sensitivity of -80 dB is achieved with faithful reproduction of the interferometric signal envelope. A sample image of finger tip is presented. PMID:18269983

  6. A CMOS low power, process/temperature variation tolerant RSSI with an integrated AGC loop

    NASA Astrophysics Data System (ADS)

    Qianqian, Lei; Min, Lin; Yin, Shi

    2013-03-01

    A low voltage low power CMOS limiter and received signal strength indicator (RSSI) with an integrated automatic gain control (AGC) loop for a short-distance receiver are implemented in SMIC 0.13 μm CMOS technology. The RSSI has a dynamic range of more than 60 dB and the RSSI linearity error is within ±0.5 dB for an input power from -65 to -8 dBm. The RSSI output voltage is from 0.15 to 1 V and the slope of the curve is 14.17 mV/dB while consuming 1.5 mA (I and Q paths) from a 1.2 V supply. Auto LNA gain mode selection with a combined RSSI function is also presented. Furthermore, with the compensation circuit, the proposed RSSI shows good temperature-independent and good robustness against process variation characteristics.

  7. Characterization of silicon-gate CMOS/SOS integrated circuits processed with ion implantation

    NASA Technical Reports Server (NTRS)

    Woo, D. S.

    1977-01-01

    Progress in developing the application of ion implantation techniques to silicon gate CMOS/SOS processing is described. All of the conventional doping techniques such as in situ doping of the epi-film and diffusion by means of doped oxides are replaced by ion implantation. Various devices and process parameters are characterized to generate an optimum process by the use of an existing SOS test array. As a result, excellent circuit performance is achieved. A general description of the all ion implantation process is presented.

  8. Photo-Spectrometer Realized In A Standard Cmos Ic Process

    DOEpatents

    Simpson, Michael L.; Ericson, M. Nance; Dress, William B.; Jellison, Gerald E.; Sitter, Jr., David N.; Wintenberg, Alan L.

    1999-10-12

    A spectrometer, comprises: a semiconductor having a silicon substrate, the substrate having integrally formed thereon a plurality of layers forming photo diodes, each of the photo diodes having an independent spectral response to an input spectra within a spectral range of the semiconductor and each of the photo diodes formed only from at least one of the plurality of layers of the semiconductor above the substrate; and, a signal processing circuit for modifying signals from the photo diodes with respective weights, the weighted signals being representative of a specific spectral response. The photo diodes have different junction depths and different polycrystalline silicon and oxide coverings. The signal processing circuit applies the respective weights and sums the weighted signals. In a corresponding method, a spectrometer is manufactured by manipulating only the standard masks, materials and fabrication steps of standard semiconductor processing, and integrating the spectrometer with a signal processing circuit.

  9. Integration of solid-state nanopores in a 0.5 μm CMOS foundry process

    NASA Astrophysics Data System (ADS)

    Uddin, A.; Yemenicioglu, S.; Chen, C.-H.; Corigliano, E.; Milaninia, K.; Theogarajan, L.

    2013-04-01

    High-bandwidth and low-noise nanopore sensor and detection electronics are crucial in achieving single-DNA-base resolution. A potential way to accomplish this goal is to integrate solid-state nanopores within a CMOS platform, in close proximity to the biasing electrodes and custom-designed amplifier electronics. Here we report the integration of solid-state nanopore devices in a commercial complementary metal-oxide-semiconductor (CMOS) potentiostat chip implemented in On-Semiconductor’s 0.5 μm technology. Nanopore membranes incorporating electrodes are fabricated by post-CMOS micromachining utilizing the n+ polysilicon/SiO2/n+ polysilicon capacitor structure available in the aforementioned process. Nanopores are created in the CMOS process by drilling in a transmission electron microscope and shrinking by atomic layer deposition. We also describe a batch fabrication method to process a large of number of electrode-embedded nanopores with sub-10 nm diameter across CMOS-compatible wafers by electron beam lithography and atomic layer deposition. The CMOS-compatibility of our fabrication process is verified by testing the electrical functionality of on-chip circuitry. We observe high current leakage with the CMOS nanopore devices due to the ionic diffusion through the SiO2 membrane. To prevent this leakage, we coat the membrane with Al2O3, which acts as an efficient diffusion barrier against alkali ions. The resulting nanopore devices also exhibit higher robustness and lower 1/f noise as compared to SiO2 and SiNx. Furthermore, we propose a theoretical model for our low-capacitance CMOS nanopore devices, showing good agreement with the experimental value. In addition, experiments and theoretical models of translocation studies are presented using 48.5 kbp λ-DNA in order to prove the functionality of on-chip pores coated with Al2O3.

  10. Integration of solid-state nanopores in a 0.5 μm CMOS foundry process.

    PubMed

    Uddin, A; Yemenicioglu, S; Chen, C-H; Corigliano, E; Milaninia, K; Theogarajan, L

    2013-04-19

    High-bandwidth and low-noise nanopore sensor and detection electronics are crucial in achieving single-DNA-base resolution. A potential way to accomplish this goal is to integrate solid-state nanopores within a CMOS platform, in close proximity to the biasing electrodes and custom-designed amplifier electronics. Here we report the integration of solid-state nanopore devices in a commercial complementary metal-oxide-semiconductor (CMOS) potentiostat chip implemented in On-Semiconductor's 0.5 μm technology. Nanopore membranes incorporating electrodes are fabricated by post-CMOS micromachining utilizing the n+ polysilicon/SiO2/n+ polysilicon capacitor structure available in the aforementioned process. Nanopores are created in the CMOS process by drilling in a transmission electron microscope and shrinking by atomic layer deposition. We also describe a batch fabrication method to process a large of number of electrode-embedded nanopores with sub-10 nm diameter across CMOS-compatible wafers by electron beam lithography and atomic layer deposition. The CMOS-compatibility of our fabrication process is verified by testing the electrical functionality of on-chip circuitry. We observe high current leakage with the CMOS nanopore devices due to the ionic diffusion through the SiO2 membrane. To prevent this leakage, we coat the membrane with Al2O3, which acts as an efficient diffusion barrier against alkali ions. The resulting nanopore devices also exhibit higher robustness and lower 1/f noise as compared to SiO2 and SiNx. Furthermore, we propose a theoretical model for our low-capacitance CMOS nanopore devices, showing good agreement with the experimental value. In addition, experiments and theoretical models of translocation studies are presented using 48.5 kbp λ-DNA in order to prove the functionality of on-chip pores coated with Al2O3. PMID:23519330

  11. Integration of solid-state nanopores in a 0.5 μm cmos foundry process

    PubMed Central

    Uddin, A; Yemenicioglu, S; Chen, C-H; Corigliano, E; Milaninia, K; Theogarajan, L

    2013-01-01

    High-bandwidth and low-noise nanopore sensor and detection electronics are crucial in achieving single-DNA base resolution. A potential way to accomplish this goal is to integrate solid-state nanopores within a CMOS platform, in close proximity to the biasing electrodes and custom-designed amplifier electronics. Here we report the integration of solid-state nanopore devices in a commercial complementary metal-oxide semiconductor (CMOS) potentiostat chip implemented in On-Semiconductor’s 0.5 μm technology. Nanopore membranes incorporating electrodes are fabricated by post-CMOS micromachining utilizing the N+ polysilicon/SiO2/N+ polysilicon capacitor structure available in the aforementioned process. Nanopores are created in the CMOS process by drilling in a transmission electron microscope and shrinking by atomic layer deposition. We also describe a batch fabrication method to process a large of number of electrode-embedded nanopores with sub-10 nm diameter across CMOS-compatible wafers by electron beam lithography and atomic layer deposition. The CMOS-compatibility of our fabrication process is verified by testing the electrical functionality of on-chip circuitry. We observe high current leakage with the CMOS nanopore devices due to the ionic diffusion through the SiO2 membrane. To prevent this leakage, we coat the membrane with Al2O3 which acts as an efficient diffusion barrier against alkali ions. The resulting nanopore devices also exhibit higher robustness and lower 1/f noise as compared to SiO2 and SiNx. Furthermore, we propose a theoretical model for our low-capacitance CMOS nanopore devices, showing good agreement with the experimental value. In addition, experiments and theoretical models of translocation studies are presented using 48.5 kbp λ-DNA in order to prove the functionality of on-chip pores coated with Al2O3. PMID:23519330

  12. Sub-bandgap polysilicon photodetector in zero-change CMOS process for telecommunication wavelength.

    PubMed

    Meng, Huaiyu; Atabaki, Amir; Orcutt, Jason S; Ram, Rajeev J

    2015-12-14

    We report a defect state based guided-wave photoconductive detector at 1360-1630 nm telecommunication wavelength directly in standard microelectronics CMOS processes, with zero in-foundry process modification. The defect states in the polysilicon used to define a transistor gate assists light absorption. The body crystalline silicon helps form an inverse ridge waveguide to confine optical mode. The measured responsivity and dark current at 25 V forward bias are 0.34 A/W and 1.4 μA, respectively. The 3 dB bandwidth of the device is 1 GHz. PMID:26699053

  13. A linearity-enhanced time-domain CMOS thermostat with process-variation calibration.

    PubMed

    Chen, Chun-Chi; Lin, Yi

    2014-01-01

    This study proposes a linearity-enhanced time-domain complementary metal-oxide semiconductor (CMOS) thermostat with process-variation calibration for improving the accuracy, expanding the operating temperature range, and reducing test costs. For sensing temperatures in the time domain, the large characteristic curve of a CMOS inverter markedly affects the accuracy, particularly when the operating temperature range is increased. To enhance the on-chip linearity, this study proposes a novel temperature-sensing cell comprising a simple buffer and a buffer with a thermal-compensation circuit to achieve a linearised delay. Thus, a linearity-enhanced oscillator consisting of these cells can generate an oscillation period with high linearity. To achieve one-point calibration support, an adjustable-gain time stretcher and calibration circuit were adopted for the process-variation calibration. The programmable temperature set point was determined using a reference clock and a second (identical) adjustable-gain time stretcher. A delay-time comparator with a built-in customised hysteresis circuit was used to perform a time comparison to obtain an appropriate response. Based on the proposed design, a thermostat with a small area of 0.067 mm2 was fabricated using a TSMC 0.35-μm 2P4M CMOS process, and a robust resolution of 0.05 °C and dissipation of 25 μW were achieved at a sample rate of 10 samples/s. An inaccuracy of -0.35 °C to 1.35 °C was achieved after one-point calibration at temperatures ranging from -40 °C to 120 °C. Compared with existing thermostats, the proposed thermostat substantially improves the circuit area, accuracy, operating temperature range, and test costs. PMID:25310469

  14. A new laterally conductive bridge random access memory by fully CMOS logic compatible process

    NASA Astrophysics Data System (ADS)

    Hsieh, Min-Che; Chin, Yung-Wen; Lin, Yu-Cheng; Chih, Yu-Der; Tsai, Kan-Hsueh; Tsai, Ming-Jinn; King, Ya-Chin; Lin, Chrong Jung

    2014-01-01

    This paper proposes a novel laterally conductive bridge random access memory (L-CBRAM) module using a fully CMOS logic compatible process. A contact buffer layer between the poly-Si and contact plug enables the lateral Ti-based atomic layer to provide on/off resistance ratio via bipolar operations. The proposed device reached more than 100 pulse cycles with an on/off ratio over 10 and very stable data retention under high temperature operations. These results make this Ti-based L-CBRAM cell a promising solution for advanced embedded multi-time programmable (MTP) memory applications.

  15. Characterization of silicon-gate CMOS/SOS integrated circuits processed with ion implantation

    NASA Technical Reports Server (NTRS)

    Woo, D. S.

    1980-01-01

    The double layer metallization technology applied on p type silicon gate CMOS/SOS integrated circuits is described. A smooth metal surface was obtained by using the 2% Si-sputtered Al. More than 10% probe yield was achieved on solar cell controller circuit TCS136 (or MSFC-SC101). Reliability tests were performed on 15 arrays at 150 C. Only three arrays failed during the burn in, and 18 arrays out of 22 functioning arrays maintained the leakage current below 100 milli-A. Analysis indicates that this technology will be a viable process if the metal short circuit problem between the two metals can be reduced.

  16. Towards on-chip integration of brain imaging photodetectors using standard CMOS process.

    PubMed

    Kamrani, Ehsan; Lesage, Frederic; Sawan, Mohamad

    2013-01-01

    The main effects of on-chip integration on the performance and efficiency of silicon avalanche photodiode (SiAPD) and photodetector front-end is addressed in this paper based on the simulation and fabrication experiments. Two different silicon APDs are fabricated separately and also integrated with a transimpedance amplifier (TIA) front-end using standard CMOS technology. SiAPDs are designed in p+/n-well structure with guard rings realized in different shapes. The TIA front-end has been designed using distributed-gain concept combined with resistive-feedback and common-gate topology to reach low-noise and high gain-bandwidth product (GBW) characteristics. The integrated SiAPDs show higher signal-to-noise ratio (SNR), sensitivity and detection efficiency comparing to the separate SiAPDs. The integration does not show a significant effect on the gain and preserves the low power consumption. Using APDs with p-well guard-ring is preferred due to the higher observed efficiency after integration. PMID:24110276

  17. Lithography with infrared illumination alignment for advanced BiCMOS backside processing

    NASA Astrophysics Data System (ADS)

    Kulse, P.; Schulz, K.; Behrendt, U.; Wietstruck, M.; Kaynak, M.; Marschmeyer, S.; Tillack, B.

    2014-10-01

    Driven by new applications such as BiCMOS embedded RF-MEMS, high-Q passives, Si-based microfluidics for bio sensing and InP-Si BiCMOS heterointegration [1-4], accurate alignment between back and front side is highly desired. In this paper, we present an advanced back to front side alignment technique and implementation of it into the back side processing module of IHP's 0.25/0.13 μm high performance SiGe:C BiCMOS technology. Using the Nikon i-line Stepper NSR-SF150, a new infrared alignment system has been introduced. The developed technique enables a high resolution and accurate lithography on the back side of the BiCMOS-processed Si wafers for additional backside processing, such as backside routing metallization. In comparison to previous work [5] with overlay values of 500 nm and the requirement of two-step lithography, the new approach provides significant improvement in the overlay accuracy with overlay values of 200 nm and a significant increase of the fabrication throughput by eliminating the need of the two-step lithography. The new non-contact alignment procedure allows a direct back to front side alignment using any front side alignment mark (Fig. 2), which generated a signal by reflecting the IR light beam. Followed by a measurement of the misalignment between both front to back side overlay marks (Fig. 3) using EVG®NT40 automated measurement system, a final lithography process with wafer interfield corrections is applied to obtain a minimum overlay of 200 nm. For the specific application of deep Si etching using Bosch process, the etch profile angle deviation across the wafer (tilting) has to be considered as well. From experimental data, an etch profile angle deviation of 8 μm across the wafer has been measured (Fig. 7). The overlay error caused by tilting was corrected by optimization and adjustment of the stepper offset parameters. All measurements of back to front side misalignment were performed with the EVG®40NT automated measurement system

  18. Optical modulation techniques for analog signal processing and CMOS compatible electro-optic modulation

    NASA Astrophysics Data System (ADS)

    Gill, Douglas M.; Rasras, Mahmoud; Tu, Kun-Yii; Chen, Young-Kai; White, Alice E.; Patel, Sanjay S.; Carothers, Daniel; Pomerene, Andrew; Kamocsai, Robert; Beattie, James; Kopa, Anthony; Apsel, Alyssa; Beals, Mark; Mitchel, Jurgen; Liu, Jifeng; Kimerling, Lionel C.

    2008-02-01

    Integrating electronic and photonic functions onto a single silicon-based chip using techniques compatible with mass-production CMOS electronics will enable new design paradigms for existing system architectures and open new opportunities for electro-optic applications with the potential to dramatically change the management, cost, footprint, weight, and power consumption of today's communication systems. While broadband analog system applications represent a smaller volume market than that for digital data transmission, there are significant deployments of analog electro-optic systems for commercial and military applications. Broadband linear modulation is a critical building block in optical analog signal processing and also could have significant applications in digital communication systems. Recently, broadband electro-optic modulators on a silicon platform have been demonstrated based on the plasma dispersion effect. The use of the plasma dispersion effect within a CMOS compatible waveguide creates new challenges and opportunities for analog signal processing since the index and propagation loss change within the waveguide during modulation. We will review the current status of silicon-based electrooptic modulators and also linearization techniques for optical modulation.

  19. Device oriented statistical modeling method for process variability in 45nm analog CMOS technology

    NASA Astrophysics Data System (ADS)

    Ajayan, K. R.; Bhat, Navakanta

    2012-10-01

    With the rapid scaling down of the semiconductor process technology, the process variation aware circuit design has become essential today. Several statistical models have been proposed to deal with the process variation. We propose an accurate BSIM model for handling variability in 45nm CMOS technology. The MOSFET is designed to meet the specification of low standby power technology of International Technology Roadmap for Semiconductors (ITRS).The process parameters variation of annealing temperature, oxide thickness, halo dose and title angle of halo implant are considered for the model development. One parameter variation at a time is considered for developing the model. The model validation is done by performance matching with device simulation results and reported error is less than 10%.

  20. On-chip nanostructures for polarization imaging and multispectral sensing using dedicated layers of modified CMOS processes

    NASA Astrophysics Data System (ADS)

    Junger, Stephan; Tschekalinskij, Wladimir; Verwaal, Nanko; Weber, Norbert

    2011-03-01

    Sub-wavelength gratings and hole arrays in metal films are applicable for polarization and spectral selective sensors, respectively. We demonstrate the fabrication of wire grid polarizers using standard complementary metal-oxide semiconductor (CMOS) processes. Extraordinary optical transmission of hole arrays was achieved by using the dedicated layer of a modified CMOS process. The structures were simulated using the finite-difference time-domain (FDTD) method and fabricated using the work flow of integrated circuits. A high-speed polarization image sensor with a pixel size of 6 μm was designed and demonstrated, and multispectral sensing was implemented using nanostructures with different spectral filter performances on a single chip.

  1. A robust color signal processing with wide dynamic range WRGB CMOS image sensor

    NASA Astrophysics Data System (ADS)

    Kawada, Shun; Kuroda, Rihito; Sugawa, Shigetoshi

    2011-01-01

    We have developed a robust color reproduction methodology by a simple calculation with a new color matrix using the formerly developed wide dynamic range WRGB lateral overflow integration capacitor (LOFIC) CMOS image sensor. The image sensor was fabricated through a 0.18 μm CMOS technology and has a 45 degrees oblique pixel array, the 4.2 μm effective pixel pitch and the W pixels. A W pixel was formed by replacing one of the two G pixels in the Bayer RGB color filter. The W pixel has a high sensitivity through the visible light waveband. An emerald green and yellow (EGY) signal is generated from the difference between the W signal and the sum of RGB signals. This EGY signal mainly includes emerald green and yellow lights. These colors are difficult to be reproduced accurately by the conventional simple linear matrix because their wave lengths are in the valleys of the spectral sensitivity characteristics of the RGB pixels. A new linear matrix based on the EGY-RGB signal was developed. Using this simple matrix, a highly accurate color processing with a large margin to the sensitivity fluctuation and noise has been achieved.

  2. CMOS array of photodiodes with electronic processing for 3D optical reconstruction

    NASA Astrophysics Data System (ADS)

    Hornero, Gemma; Montane, Enric; Chapinal, Genis; Moreno, Mauricio; Herms, Atila

    2001-04-01

    It is well known that laser time-of-flight (TOF) and optical triangulation are the most useful optical techniques for distance measurements. The first one is more suitable for large distances, since for short range of distances high modulation frequencies of laser diodes (©200-500MHz) are needed. For these ranges, optical triangulation is simpler, as it is only necessary to read the projection of the laser point over a linear optical sensor without any laser modulation. Laser triangulation is based on the rotation of the object. This motion shifts the projected point over the linear sensor, resulting on 3D information, by means of the whole readout of the linear sensor in each angle position. On the other hand, a hybrid method of triangulation and TOF can be implemented. In this case, a synchronized scanning of a laser beam over the object results in different arrival times of light to each pixel. The 3D information is carried by these delays. Only a single readout of the linear sensor is needed. In this work we present the design of two different linear arrays of photodiodes in CMOS technology, the first one based on the Optical triangulation measurement and the second one based in this hybrid method (TFO). In contrast to PSD (Position Sensitive Device) and CCDs, CMOS technology can include, on the same chip, photodiodes, control and processing electronics, that in the other cases should be implemented with external microcontrollers.

  3. High-speed bipolar phototransistors in a 180 nm CMOS process

    PubMed Central

    Kostov, P.; Gaberl, W.; Zimmermann, H.

    2013-01-01

    Several high-speed pnp phototransistors built in a standard 180 nm CMOS process are presented. The phototransistors were implemented in sizes of 40×40 μm2 and 100×100 μm2. Different base and emitter areas lead to different characteristics of the phototransistors. As starting material a p+ wafer with a p− epitaxial layer on top was used. The phototransistors were optically characterized at wavelengths of 410, 675 and 850 nm. Bandwidths up to 92 MHz and dynamic responsivities up to 2.95 A/W were achieved. Evaluating the results, we can say that the presented phototransistors are well suited for high speed photosensitive optical applications where inherent amplification is needed. Further on, the standard silicon CMOS implementation opens the possibility for cheap integration of integrated optoelectronic circuits. Possible applications for the presented phototransistors are low cost high speed image sensors, opto-couplers, etc. PMID:23847388

  4. High-speed bipolar phototransistors in a 180 nm CMOS process.

    PubMed

    Kostov, P; Gaberl, W; Zimmermann, H

    2013-03-01

    Several high-speed pnp phototransistors built in a standard 180 nm CMOS process are presented. The phototransistors were implemented in sizes of 40×40 μm(2) and 100×100 μm(2). Different base and emitter areas lead to different characteristics of the phototransistors. As starting material a p(+) wafer with a p(-) epitaxial layer on top was used. The phototransistors were optically characterized at wavelengths of 410, 675 and 850 nm. Bandwidths up to 92 MHz and dynamic responsivities up to 2.95 A/W were achieved. Evaluating the results, we can say that the presented phototransistors are well suited for high speed photosensitive optical applications where inherent amplification is needed. Further on, the standard silicon CMOS implementation opens the possibility for cheap integration of integrated optoelectronic circuits. Possible applications for the presented phototransistors are low cost high speed image sensors, opto-couplers, etc. PMID:23847388

  5. Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

    PubMed Central

    Tseng, Jian-Zhi; Wu, Chyan-Chyi; Dai, Ching-Liang

    2014-01-01

    The modeling and fabrication of a magnetic microsensor based on a magneto-transistor were presented. The magnetic sensor is fabricated by the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process without any post-process. The finite element method (FEM) software Sentaurus TCAD is utilized to analyze the electrical properties and carriers motion path of the magneto-transistor. A readout circuit is used to amplify the voltage difference of the bases into the output voltage. Experiments show that the sensitivity of the magnetic sensor is 354 mV/T at the supply current of 4 mA. PMID:24732100

  6. Low Temperature Processed Complementary Metal Oxide Semiconductor (CMOS) Device by Oxidation Effect from Capping Layer

    PubMed Central

    Wang, Zhenwei; Al-Jawhari, Hala A.; Nayak, Pradipta K.; Caraveo-Frescas, J. A.; Wei, Nini; Hedhili, M. N.; Alshareef, H. N.

    2015-01-01

    In this report, both p- and n-type tin oxide thin-film transistors (TFTs) were simultaneously achieved using single-step deposition of the tin oxide channel layer. The tuning of charge carrier polarity in the tin oxide channel is achieved by selectively depositing a copper oxide capping layer on top of tin oxide, which serves as an oxygen source, providing additional oxygen to form an n-type tin dioxide phase. The oxidation process can be realized by annealing at temperature as low as 190°C in air, which is significantly lower than the temperature generally required to form tin dioxide. Based on this approach, CMOS inverters based entirely on tin oxide TFTs were fabricated. Our method provides a solution to lower the process temperature for tin dioxide phase, which facilitates the application of this transparent oxide semiconductor in emerging electronic devices field. PMID:25892711

  7. Fabrication and characterization of groove-gate MOSFETs based on a self-aligned CMOS process

    NASA Astrophysics Data System (ADS)

    Ma, Xiao-Hua; Hao, Yue; Sun, Bao-Gang; Gao, Hai-Xia; Ren, Hong-Xia; Zhang, Jin-Cheng; Zhang, Jin-Feng; Zhang, Xiao-Ju; Zhang, Wei-Dong

    2006-01-01

    N and P-channel groove-gate MOSFETs based on a self-aligned CMOS process have been fabricated and characterized. For the devices with channel length of 140nm, the measured drain induced barrier lowering (DIBL) was 66mV/V for n-MOSFETs and 82mV/V for p-MOSFETs. The substrate current of a groove-gate n-MOSFET was 150 times less than that of a conventional planar n-MOSFET. These results demonstrate that groove-gate MOSFETs have excellent capabilities in suppressing short-channel effects. It is worth emphasizing that our groove-gate MOSFET devices are fabricated by using a simple process flow, with the potential of fabricating devices in the sub-100nm range.

  8. CMOS compatible fabrication process of MEMS resonator for timing reference and sensing application

    NASA Astrophysics Data System (ADS)

    Huynh, Duc H.; Nguyen, Phuong D.; Nguyen, Thanh C.; Skafidas, Stan; Evans, Robin

    2015-12-01

    Frequency reference and timing control devices are ubiquitous in electronic applications. There is at least one resonator required for each of this device. Currently electromechanical resonators such as crystal resonator, ceramic resonator are the ultimate choices. This tendency will probably keep going for many more years. However, current market demands for small size, low power consumption, cheap and reliable products, has divulged many limitations of this type of resonators. They cannot be integrated into standard CMOS (Complement metaloxide- semiconductor) IC (Integrated Circuit) due to material and fabrication process incompatibility. Currently, these devices are off-chip and they require external circuitries to interface with the ICs. This configuration significantly increases the overall size and cost of the entire electronic system. In addition, extra external connection, especially at high frequency, will potentially create negative impacts on the performance of the entire system due to signal degradation and parasitic effects. Furthermore, due to off-chip packaging nature, these devices are quite expensive, particularly for high frequency and high quality factor devices. To address these issues, researchers have been intensively studying on an alternative for type of resonator by utilizing the new emerging MEMS (Micro-electro-mechanical systems) technology. Recent progress in this field has demonstrated a MEMS resonator with resonant frequency of 2.97 GHz and quality factor (measured in vacuum) of 42900. Despite this great achievement, this prototype is still far from being fully integrated into CMOS system due to incompatibility in fabrication process and its high series motional impedance. On the other hand, fully integrated MEMS resonator had been demonstrated but at lower frequency and quality factor. We propose a design and fabrication process for a low cost, high frequency and a high quality MEMS resonator, which can be integrated into a standard

  9. Nonlinear optical signal processing in high figure of merit CMOS compatible platforms

    NASA Astrophysics Data System (ADS)

    Moss, D. J.; Morandotti, R.

    2015-05-01

    Photonic integrated circuits that exploit nonlinear optics in order to generate and process signals all-optically have achieved performance far superior to that possible electronically - particularly with respect to speed. Although silicon-on-insulator has been the leading platform for nonlinear optics for some time, its high two-photon absorption at telecommunications wavelengths poses a fundamental limitation. We review the recent achievements based in new CMOS-compatible platforms that are better suited than SOI for nonlinear optics, focusing on amorphous silicon and Hydex glass. We highlight their potential as well as the challenges to achieving practical solutions for many key applications. These material systems have opened up many new capabilities such as on-chip optical frequency comb generation and ultrafast optical pulse generation and measurement.

  10. Ge microdisk with lithographically-tunable strain using CMOS-compatible process.

    PubMed

    Sukhdeo, David S; Petykiewicz, Jan; Gupta, Shashank; Kim, Daeik; Woo, Sungdae; Kim, Youngmin; Vučković, Jelena; Saraswat, Krishna C; Nam, Donguk

    2015-12-28

    We present germanium microdisk optical resonators under a large biaxial tensile strain using a CMOS-compatible fabrication process. Biaxial tensile strain of ~0.7% is achieved by means of a stress concentration technique that allows the strain level to be customized by carefully selecting certain lithographic dimensions. The partial strain relaxation at the edges of a patterned germanium microdisk is compensated by depositing compressively stressed silicon nitride layer. Two-dimensional Raman spectroscopy measurements along with finite-element method simulations confirm a relatively homogeneous strain distribution within the final microdisk structure. Photoluminescence results show clear optical resonances due to whispering gallery modes which are in good agreement with finite-difference time-domain optical simulations. Our bandgap-customizable microdisks present a new route towards an efficient germanium light source for on-chip optical interconnects. PMID:26831991

  11. Avoiding sensor blindness in Geiger mode avalanche photodiode arrays fabricated in a conventional CMOS process

    NASA Astrophysics Data System (ADS)

    Vilella, E.; Diéguez, A.

    2011-12-01

    The need to move forward in the knowledge of the subatomic world has stimulated the development of new particle colliders. However, the objectives of the next generation of colliders sets unprecedented challenges to the detector performance. The purpose of this contribution is to present a bidimensional array based on avalanche photodiodes operated in the Geiger mode to track high energy particles in future linear colliders. The bidimensional array can function in a gated mode to reduce the probability to detect noise counts interfering with real events. Low reverse overvoltages are used to lessen the dark count rate. Experimental results demonstrate that the prototype fabricated with a standard HV-CMOS process presents an increased efficiency and avoids sensor blindness by applying the proposed techniques.

  12. Scaling Behavior of Carbon Nanotube-based Biosensors Integrated on CMOS Signal-processing Circuits

    NASA Astrophysics Data System (ADS)

    Lee, Byung Yang; Sung, Moon Gyu; Lee, Dong Joon; Lee, Minbaek; Lee, Joohyung; Cho, Eunju; Hong, Seunghun; Seo, Sung Min; Cheon, Jun-Ho; Lee, Hyunjoong; Kim, Suhwan; Park, Young June; Chung, In-Young

    2010-03-01

    We built uniform arrays of carbon nanotube (CNT)-based biosensors via linker-free directed assembly strategy, where surface molecular patterns were utilized to direct the assembly of CNTs onto specific regions of the devices. The sensor arrays were utilized to detect ammonia and Hg^+ ions with high sensitivity and selectivity, and the scaling behavior of sensor sensitivity was studied by parallel detection of multiple sensors. We found that the scaling behavior of the sensor sensitivity can be explained by the combination of two effects: adsorption of analyte molecules onto CNT surface and the transconductance change of the CNT junctions. Furthermore, 64 CNT-based sensors were integrated with CMOS circuits into a single-die system-on-a-chip for the detection of glutamate, a neurotransmitter, by combining several technological breakthroughs such as efficient signal processing, uniform CNT networks, and biocompatible functionalization of CNT-based sensors.

  13. Pick-and-place process for sensitivity improvement of the capacitive type CMOS MEMS 2-axis tilt sensor

    NASA Astrophysics Data System (ADS)

    Chang, Chun-I.; Tsai, Ming-Han; Liu, Yu-Chia; Sun, Chih-Ming; Fang, Weileun

    2013-09-01

    This study exploits the foundry available complimentary metal-oxide-semiconductor (CMOS) process and the packaging house available pick-and-place technology to implement a capacitive type micromachined 2-axis tilt sensor. The suspended micro mechanical structures such as the spring, stage and sensing electrodes are fabricated using the CMOS microelectromechanical systems (MEMS) processes. A bulk block is assembled onto the suspended stage by pick-and-place technology to increase the proof-mass of the tilt sensor. The low temperature UV-glue dispensing and curing processes are employed to bond the block onto the stage. Thus, the sensitivity of the CMOS MEMS capacitive type 2-axis tilt sensor is significantly improved. In application, this study successfully demonstrates the bonding of a bulk solder ball of 100 µm in diameter with a 2-axis tilt sensor fabricated using the standard TSMC 0.35 µm 2P4M CMOS process. Measurements show the sensitivities of the 2-axis tilt sensor are increased for 2.06-fold (x-axis) and 1.78-fold (y-axis) after adding the solder ball. Note that the sensitivity can be further improved by reducing the parasitic capacitance and the mismatch of sensing electrodes caused by the solder ball.

  14. Laser doppler blood flow imaging using a CMOS imaging sensor with on-chip signal processing.

    PubMed

    He, Diwei; Nguyen, Hoang C; Hayes-Gill, Barrie R; Zhu, Yiqun; Crowe, John A; Gill, Cally; Clough, Geraldine F; Morgan, Stephen P

    2013-01-01

    The first fully integrated 2D CMOS imaging sensor with on-chip signal processing for applications in laser Doppler blood flow (LDBF) imaging has been designed and tested. To obtain a space efficient design over 64 × 64 pixels means that standard processing electronics used off-chip cannot be implemented. Therefore the analog signal processing at each pixel is a tailored design for LDBF signals with balanced optimization for signal-to-noise ratio and silicon area. This custom made sensor offers key advantages over conventional sensors, viz. the analog signal processing at the pixel level carries out signal normalization; the AC amplification in combination with an anti-aliasing filter allows analog-to-digital conversion with a low number of bits; low resource implementation of the digital processor enables on-chip processing and the data bottleneck that exists between the detector and processing electronics has been overcome. The sensor demonstrates good agreement with simulation at each design stage. The measured optical performance of the sensor is demonstrated using modulated light signals and in vivo blood flow experiments. Images showing blood flow changes with arterial occlusion and an inflammatory response to a histamine skin-prick demonstrate that the sensor array is capable of detecting blood flow signals from tissue. PMID:24051525

  15. Laser Doppler Blood Flow Imaging Using a CMOS Imaging Sensor with On-Chip Signal Processing

    PubMed Central

    He, Diwei; Nguyen, Hoang C.; Hayes-Gill, Barrie R.; Zhu, Yiqun; Crowe, John A.; Gill, Cally; Clough, Geraldine F.; Morgan, Stephen P.

    2013-01-01

    The first fully integrated 2D CMOS imaging sensor with on-chip signal processing for applications in laser Doppler blood flow (LDBF) imaging has been designed and tested. To obtain a space efficient design over 64 × 64 pixels means that standard processing electronics used off-chip cannot be implemented. Therefore the analog signal processing at each pixel is a tailored design for LDBF signals with balanced optimization for signal-to-noise ratio and silicon area. This custom made sensor offers key advantages over conventional sensors, viz. the analog signal processing at the pixel level carries out signal normalization; the AC amplification in combination with an anti-aliasing filter allows analog-to-digital conversion with a low number of bits; low resource implementation of the digital processor enables on-chip processing and the data bottleneck that exists between the detector and processing electronics has been overcome. The sensor demonstrates good agreement with simulation at each design stage. The measured optical performance of the sensor is demonstrated using modulated light signals and in vivo blood flow experiments. Images showing blood flow changes with arterial occlusion and an inflammatory response to a histamine skin-prick demonstrate that the sensor array is capable of detecting blood flow signals from tissue. PMID:24051525

  16. New interpretation of photonic yield processes (450-750nm) in multi-junction Si CMOS LEDs: simulation and analyses

    NASA Astrophysics Data System (ADS)

    Snyman, Lukas W.; Bellotti, Enrico

    2010-02-01

    Emission levels in the 450-750nm range of about 80-100 fold higher than that emitted by single junction avalanche LEDs, has been obtained. CMOS Si LED p+-i-np+ structures were modeled in order to investigate the effect of various depletion layer profiles and defect engineering on the photonic transitions in the 1.4 to 2.8 eV, 450-750nnm regime. Modeling and device simulation results showed that by utilizing a short lowly doped layer in between a highly doped p+ layer and n layer can enhance the photonic yields by orders of magnitude through an increase in the dynamic carrier densities in the device and favoring enhanced lateral multiplication processes. The electric field profile should be of the order of 5 x 105 V.cm-1 and about 0.5 micron long. Injecting of carriers of opposite charge type from an opposing forward bias junction further enhance the photonic yield. These models and interpretations is confirmed by analyses of device designs as realized in 1.2 μm and 0.35 CMOS technology. The device design involved normal CMOS design and processing procedures with no excessive micro-dimensioning. The current devices operated in the 8-10V, 1uA - 2mA regime and yield emission intensities of up to 100 nW.μm-2. The current emission levels are about three orders higher than the low frequency detectability limit of Si CMOS p-n detectors of corresponding area. The particular design favors higher emission levels towards the 750nm wavelength region. This makes diverse electro-optical applications possible such as optical communication on chip, diverse optical signal processing and wave-guiding. It also enables realization of on chip Micro-Optical-Electro-Mechanical Sensors (MOEMS), which could lead to the development of so-called "smart chips" utilizing standard CMOS integrated circuitry.

  17. A CMOS high resolution, process/temperature variation tolerant RSSI for WIA-PA transceiver

    NASA Astrophysics Data System (ADS)

    Tao, Yang; Yu, Jiang; Jie, Li; Jiangfei, Guo; Hua, Chen; Jingyu, Han; Guiliang, Guo; Yuepeng, Yan

    2015-08-01

    This paper presents a high resolution, process/temperature variation tolerant received signal strength indicator (RSSI) for wireless networks for industrial automation process automation (WIA-PA) transceiver fabricated in 0.18 μm CMOS technology. The active area of the RSSI is 0.24 mm2. Measurement results show that the proposed RSSI has a dynamic range more than 70 dB and the linearity error is within ±0.5 dB for an input power from -70 to 0 dBm (dBm to 50 Ω), the corresponding output voltage is from 0.81 to 1.657 V and the RSSI slope is 12.1 mV/dB while consuming all of 2 mA from a 1.8 V power supply. Furthermore, by the help of the integrated compensation circuit, the proposed RSSI shows the temperature error within ±1.5 dB from -40 to 85 °C, and process variation error within ±0.25 dB, which exhibits good temperature-independence and excellent robustness against process variation characteristics. Project supported by the National High Technology Research and Development Program of China (No. 2011AA040102).

  18. Characterization of silicon-gate CMOS/SOS integrated circuits processed with ion implantation

    NASA Technical Reports Server (NTRS)

    Woo, D. S.

    1982-01-01

    The procedure used to generate MEBES masks and produce test wafers from the 10X Mann 1600 Pattern Generator Tape using existing CAD utility programs and the MEBES machine in the RCA Solid State Technology Center are described. The test vehicle used is the MSFC-designed SC102 Solar House Timing Circuit. When transforming the Mann 1600 tapes into MEBES tapes, extreme care is required in order to obtain accurate minimum linewidths when working with two different coding systems because the minimum grid sizes may be different for the two systems. The minimum grid sizes are 0.025 mil for MSFC Mann 1600 and 0.02 mil for MEBES. Some snapping to the next grid is therefore inevitable, and the results of this snapping effect are significant when submicron lines are present. However, no problem was noticed in the SC102 circuit because its minimum linewidth is 0.3 mil (7.6 microns). MEBES masks were fabricated and wafers were processed using the silicon-gate CMOS/SOS and aluminum-gate COS/MOS processing.

  19. Evaluation of Mo-doped Ti salicide process for sub-0.18-μm CMOS

    NASA Astrophysics Data System (ADS)

    Chao, Chih-Ping; Kittl, Jorge A.; Hong, Qi-Zhong; Shiau, Wei-Tsun; Rodder, Mark; Chen, Ih-Chin

    1998-09-01

    For scaled CMOS technology with gate length down to sub-0.25 micrometer, the conventional Ti salicide suffers from high polygate sheet resistance (Rsheet) due to difficulty in the low resistivity C54 TiSi2 phase transition. To improve the sub 0.25 micrometer TiSi2 Rsheet, pre-amorphization implant (PAI) was added to achieve low Rsheet down to approximately 0.1 micrometer gate length, and PAI based TiSi2 has been the base-line salicide process for current 0.25 micrometer CMOS technology. However, various studies on sub 0.18 micrometer devices have shown that PAI process tends to induce additional S/D dopant diffusion and results in the series resistance (RSD) increase and drive current degradation, especially for pMOS transistors. On the other hand, Mo implant was found effective in enhancing the C54 TiSi2 formation for narrow lines and has the potential to realize a simplified TiSi2 process with one single thermal step. However, the Mo based Ti salicide is still relatively new to date, and a complete CMOS study is helpful in identifying the trade-offs for such a process. In this work, we present a detailed CMOS evaluation of Mo doped TiSi2 process. Two different Mo based processes are studied: (1) Mo implant into gate before gate pattern (Mo-A case). In this case, the source/drain (S/D) diffusion regions have minimal Mo doping. (2) Mo implant into gate and S/D regions right before the S/D anneal (Mo-B case). For both Mo-A and Mo-B processes, we also studied the effect of Mo doses and the difference between the conventional 2-step rapid thermal process (RTP), low-temperature formation plus Ti strip plus high-temperature anneal, and the 1-step RTP process, namely low-T formation plus Ti stripe, where the high-T anneal is skipped. The results of the Mo processes are compared with three other reference salicide processes: conventional TiSi2 without PAI (Conv.), TiSi2 with Ge or As PAI and the emerging CoSi2 technology. The following CMOS care-abouts are evaluated for

  20. Design and implementation of non-linear image processing functions for CMOS image sensor

    NASA Astrophysics Data System (ADS)

    Musa, Purnawarman; Sudiro, Sunny A.; Wibowo, Eri P.; Harmanto, Suryadi; Paindavoine, Michel

    2012-11-01

    Today, solid state image sensors are used in many applications like in mobile phones, video surveillance systems, embedded medical imaging and industrial vision systems. These image sensors require the integration in the focal plane (or near the focal plane) of complex image processing algorithms. Such devices must meet the constraints related to the quality of acquired images, speed and performance of embedded processing, as well as low power consumption. To achieve these objectives, low-level analog processing allows extracting the useful information in the scene directly. For example, edge detection step followed by a local maxima extraction will facilitate the high-level processing like objects pattern recognition in a visual scene. Our goal was to design an intelligent image sensor prototype achieving high-speed image acquisition and non-linear image processing (like local minima and maxima calculations). For this purpose, we present in this article the design and test of a 64×64 pixels image sensor built in a standard CMOS Technology 0.35 μm including non-linear image processing. The architecture of our sensor, named nLiRIC (non-Linear Rapid Image Capture), is based on the implementation of an analog Minima/Maxima Unit. This MMU calculates the minimum and maximum values (non-linear functions), in real time, in a 2×2 pixels neighbourhood. Each MMU needs 52 transistors and the pitch of one pixel is 40×40 mu m. The total area of the 64×64 pixels is 12.5mm2. Our tests have shown the validity of the main functions of our new image sensor like fast image acquisition (10K frames per second), minima/maxima calculations in less then one ms.

  1. System on chip thermal vacuum sensor based on standard CMOS process

    NASA Astrophysics Data System (ADS)

    Jinfeng, Li; Zhen'an, Tang; Jiaqi, Wang

    2009-03-01

    An on-chip microelectromechanical system was fabricated in a 0.5 μm standard CMOS process for gas pressure detection. The sensor was based on a micro-hotplate (MHP) and had been integrated with a rail to rail operational amplifier and an 8-bit successive approximation register (SAR) A/D converter. A tungsten resistor was manufactured on the MHP as the sensing element, and the sacrificial layer of the sensor was made from polysilicon and etched by surface-micromachining technology. The operational amplifier was configured to make the sensor operate in constant current mode. A digital bit stream was provided as the system output. The measurement results demonstrate that the gas pressure sensitive range of the vacuum sensor extends from 1 to 105 Pa. In the gas pressure range from 1 to 100 Pa, the sensitivity of the sensor is 0.23 mV/ Pa, the linearity is 4.95%, and the hysteresis is 8.69%. The operational amplifier can drive 200 ω resistors distortionlessly, and the SAR A/D converter achieves a resolution of 7.4 bit with 100 kHz sample rate. The performance of the operational amplifier and the SAR A/D converter meets the requirements of the sensor system.

  2. Integrated CMOS photodetectors and signal processing for very low-level chemical sensing with the bioluminescent bioreporter integrated circuit

    NASA Technical Reports Server (NTRS)

    Bolton, Eric K.; Sayler, Gary S.; Nivens, David E.; Rochelle, James M.; Ripp, Steven; Simpson, Michael L.

    2002-01-01

    We report an integrated CMOS microluminometer optimized for the detection of low-level bioluminescence as part of the bioluminescent bioreporter integrated circuit (BBIC). This microluminometer improves on previous devices through careful management of the sub-femtoampere currents, both signal and leakage, that flow in the front-end processing circuitry. In particular, the photodiode is operated with a reverse bias of only a few mV, requiring special attention to the reset circuitry of the current-to-frequency converter (CFC) that forms the front-end circuit. We report a sub-femtoampere leakage current and a minimum detectable signal (MDS) of 0.15 fA (1510 s integration time) using a room temperature 1.47 mm2 CMOS photodiode. This microluminometer can detect luminescence from as few as 5000 fully induced Pseudomonas fluorescens 5RL bacterial cells. c2002 Elsevier Science B.V. All rights reserved.

  3. Design and application of a metal wet-etching post-process for the improvement of CMOS-MEMS capacitive sensors

    NASA Astrophysics Data System (ADS)

    Tsai, Ming-Han; Sun, Chih-Ming; Liu, Yu-Chia; Wang, Chuanwei; Fang, Weileun

    2009-10-01

    This study presents a process design methodology to improve the performance of a CMOS-MEMS gap-closing capacitive sensor. In addition to the standard CMOS process, the metal wet-etching approach is employed as the post-CMOS process to realize the present design. The dielectric layers of the CMOS process are exploited to form the main micro mechanical structures of the sensor. The metal layers of the CMOS process are used as the sensing electrodes and sacrificial layers. The advantages of the sensor design are as follows: (1) the parasitic capacitance is significantly reduced by the dielectric structure, (2) in-plane and out-of-plane sensing gaps can be reduced to increase the sensitivity, and (3) plate-type instead of comb-type out-of-plane sensing electrodes are available to increase the sensing electrode area. To demonstrate the feasibility of the present design, a three-axis capacitive CMOS-MEMS accelerometers chip is implemented and characterized. Measurements show that the sensitivities of accelerometers reach 11.5 mV G-1 (in the X-, Y-axes) and 7.8 mV G-1 (in the Z-axis), respectively, which are nearly one order larger than existing designs. Moreover, the detection of 10 mG excitation using the three-axis accelerometer is demonstrated for both in-plane and out-of-plane directions.

  4. Novel processes for modular integration of silicon-germanium MEMS with CMOS electronics

    NASA Astrophysics Data System (ADS)

    Low, Carrie Wing-Zin

    Equipment control, process development and materials characterization for LPCVD poly-SiGe for MEMS applications are investigated in this work. In order to develop a repeatable process in an academic laboratory, equipment monitoring methods are implemented and new process gases are explored. With the dopant gas BCl3, the design-of-experiments technique is used to study the dependencies of deposition rate, resistivity, average residual stress, strain gradient and wet etch rate in hydrogen-peroxide. Structural layer requirements for general MEMS applications are met within the process temperature constraint imposed by CMOS electronics. However, the strain gradient required for inertial sensor applications is difficult to achieve with as-deposited films. Approaches to reduce the strain gradient of LPCVD poly-SiGe are investigated. Correlation between the strain gradient and film microstructure is found using stress-depth profiling and cross-sectional TEM analysis. The effects of film deposition conditions on film microstructure are also determined. Boron-doped poly-SiGe films generally have vertically oriented grains---either conical or columnar in shape. Films with conical grain structure have large strain gradient due to highly compressive stress in the lower (initially deposited) region of the film. Films with small strain gradient usually have columnar grain structure with low defect density. It is also found that the uniformity of films deposited in a batch LPCVD reactor can be improved by increasing the deposited film thickness, using a proper seeding layer, and/or depositing the film in multiple layers. The best strain gradient achieved in our academic research laboratory is 1.1x10-6 mum-1 for a ˜3.5 mum thick film deposited at 410°C in 8 hours, with a worst-case variation across a 150 mm-diameter wafer of 1.6x10 -5 mum-1 and a worse-case variation across a load of twenty-five wafers of 7x10-5 mum-1. The effects of post-deposition annealing and argon

  5. Thermal Radiometer Signal Processing Using Radiation Hard CMOS Application Specific Integrated Circuits for Use in Harsh Planetary Environments

    NASA Technical Reports Server (NTRS)

    Quilligan, G.; DuMonthier, J.; Aslam, S.; Lakew, B.; Kleyner, I.; Katz, R.

    2015-01-01

    Thermal radiometers such as proposed for the Europa Clipper flyby mission require low noise signal processing for thermal imaging with immunity to Total Ionizing Dose (TID) and Single Event Latchup (SEL). Described is a second generation Multi- Channel Digitizer (MCD2G) Application Specific Integrated Circuit (ASIC) that accurately digitizes up to 40 thermopile pixels with greater than 50 Mrad (Si) immunity TID and 174 MeV-sq cm/mg SEL. The MCD2G ASIC uses Radiation Hardened By Design (RHBD) techniques with a 180 nm CMOS process node.

  6. Thermal Radiometer Signal Processing using Radiation Hard CMOS Application Specific Integrated Circuits for use in Harsh Planetary Environments

    NASA Astrophysics Data System (ADS)

    Quilligan, G.; DuMonthier, J.; Aslam, S.; Lakew, B.; Kleyner, I.; Katz, R.

    2015-10-01

    Thermal radiometers such as proposed for the Europa Clipper flyby mission [1] require low noise signal processing for thermal imaging with immunity to Total Ionizing Dose (TID) and Single Event Latchup (SEL). Described is a second generation Multi- Channel Digitizer (MCD2G) Application Specific Integrated Circuit (ASIC) that accurately digitizes up to 40 thermopile pixels with greater than 50 Mrad (Si) immunity TID and 174 MeV-cm2/mg SEL. The MCD2G ASIC uses Radiation Hardened By Design (RHBD) techniques with a 180 nm CMOS process node.

  7. Digital pixel CMOS focal plane array with on-chip multiply accumulate units for low-latency image processing

    NASA Astrophysics Data System (ADS)

    Little, Jeffrey W.; Tyrrell, Brian M.; D'Onofrio, Richard; Berger, Paul J.; Fernandez-Cull, Christy

    2014-06-01

    A digital pixel CMOS focal plane array has been developed to enable low latency implementations of image processing systems such as centroid trackers, Shack-Hartman wavefront sensors, and Fitts correlation trackers through the use of in-pixel digital signal processing (DSP) and generic parallel pipelined multiply accumulate (MAC) units. Light intensity digitization occurs at the pixel level, enabling in-pixel DSP and noiseless data transfer from the pixel array to the peripheral processing units. The pipelined processing of row and column image data prior to off chip readout reduces the required output bandwidth of the image sensor, thus reducing the latency of computations necessary to implement various image processing systems. Data volume reductions of over 80% lead to sub 10μs latency for completing various tracking and sensor algorithms. This paper details the architecture of the pixel-processing imager (PPI) and presents some initial results from a prototype device fabricated in a standard 65nm CMOS process hybridized to a commercial off-the-shelf short-wave infrared (SWIR) detector array.

  8. On-chip skin color detection using a triple-well CMOS process

    NASA Astrophysics Data System (ADS)

    Boussaid, Farid; Chai, Douglas; Bouzerdoum, Abdesselam

    2004-03-01

    In this paper, a current-mode VLSI architecture enabling on read-out skin detection without the need for any on-chip memory elements is proposed. An important feature of the proposed architecture is that it removes the need for demosaicing. Color separation is achieved using the strong wavelength dependence of the absorption coefficient in silicon. This wavelength dependence causes a very shallow absorption of blue light and enables red light to penetrate deeply in silicon. A triple-well process, allowing a P-well to be placed inside an N-well, is chosen to fabricate three vertically integrated photodiodes acting as the RGB color detector for each pixel. Pixels of an input RGB image are classified as skin or non-skin pixels using a statistical skin color model, chosen to offer an acceptable trade-off between skin detection performance and implementation complexity. A single processing unit is used to classify all pixels of the input RGB image. This results in reduced mismatch and also in an increased pixel fill-factor. Furthermore, the proposed current-mode architecture is programmable, allowing external control of all classifier parameters to compensate for mismatch and changing lighting conditions.

  9. Polarization- and wavelength-sensitive sub-wavelength structures fabricated in the metal layers of deep submicron CMOS processes

    NASA Astrophysics Data System (ADS)

    Junger, Stephan; Tschekalinskij, Wladimir; Verwaal, Nanko; Weber, Norbert

    2010-05-01

    Sub-wavelength structures in metal films have interesting optical properties that can be implemented for sensing applications: gratings act as wire grid polarizer, hole arrays with enhanced transmission can be used as spectral filters. This paper demonstrates the feasibility of these nanostructures using 180 nm and 90 nm complementary metal-oxide semiconductor (CMOS) processes. The metal layers of the process can be used for optical nanostructures with feature sizes down to 100 nm. We describe the design and simulation of these metal structures using the finite-difference timedomain (FDTD) method. The spectral response of the test structures was measured for different polarizations, where the gratings showed typical features of wire grid polarizers. Using a 180 nm CMOS image sensor process, an image sensor with 6 μm pixel size was designed and fabricated with different polarization selective structures allowing for polarization imaging. A polarization camera using this image sensor is demonstrated, visualizing stress birefringence as an application example. Finally, first results on the fabrication of hole arrays with a period of 320 nm are presented, showing color filters with enhanced transmission.

  10. CMOS-liquid-crystal-based image transceiver device

    NASA Astrophysics Data System (ADS)

    Efron, Uzi; Davidov, Isak; Sinelnikov, Vladimir; Levin, Ilya

    2001-05-01

    A CMOS-Liquid Crystal-Based Image Transceiver Device (ITD) is under development at the Holon Institute of Technology. The device combines both functions of imaginary and display in a single array structure. This unique structure allows the combination of see-through, aiming, imaging and the displaying of a superposed image to be combined in a single, compact, head mounted display. The CMOS-based pixel elements are designed to provide image sensor part of the pixel is based on an n-well photodiode and a three-transistors readout circuit. The imaging function is based on a back- illuminated sensor configuration. In order to provide a high imager fill-factor, two pixel configuration are proposed: 1) A p++/p-/p-well silicon structure using twin- well CMOS process; 2) an n-well processed silicon structure with a micro-lens array. The display portion of the IT device is to be fabricate don a silicon-based reflective, active matrix driver, using nematic liquid crystal material. The reflective display pixel electrode is driven by an n-MOS transistor, formed in the corresponding pixel region on the silicon substrate. The timing, sequencing and control of the IT device array are designed in a pipeline array processing scheme. A preliminary prototype system and device design have been performed and the first test device is currently being tested. Details of the device design as well as its smart goggle applications are presented.

  11. CMOS/LCOS-based image transceiver device: II

    NASA Astrophysics Data System (ADS)

    Efron, Uzi; Davidov, Isak; Sinelnikov, Vladimir; Friesem, Asher A.

    2001-11-01

    A CMOS-liquid crystal-based image transceiver device (ITD) is under development at the Holon Institute of Technology. The device combines both functions of imaging and display in a single array configuration. This unique structure allows the combination of see-through, aiming, imaging and the displaying of a superposed image to be combined in a single, compact, head mounted display. The CMOS-based pixel elements are designed to provide efficient imaging in the visible range as well as driver capabilities for the overlying liquid crystal modulator. The image sensor part of the pixel is based on an n-well photodiode and a three-transistor readout circuit. The imaging function is based on a back- illuminated sensor configuration. In order to provide a high imager fill-factor, two pixel configurations are proposed: 1) A p++/p-/p-well silicon structure using twin- well CMOS process; 2) An n-well processed silicon structure with a micro-lens array. The display portion of the IT device is to be fabricated on a silicon-based reflective, active matrix driver, using nematic liquid crystal material, in LCOS technology. The timing, sequencing and control of the IT device array are designed in a pipeline array processing scheme. A preliminary prototype system and device design have been performed and the first test device is currently undergoing testing. Details of the device design as well as its Smart Goggle applications are presented.

  12. CMOS Geiger photodiode array with integrated signal processing for imaging of 2D objects using quantum dots

    NASA Astrophysics Data System (ADS)

    Stapels, Christopher J.; Lawrence, William G.; Gurjar, Rajan S.; Johnson, Erik B.; Christian, James F.

    2008-08-01

    Geiger-mode photodiodes (GPD) act as binary photon detectors that convert analog light intensity into digital pulses. Fabrication of arrays of GPD in a CMOS environment simplifies the integration of signal-processing electronics to enhance the performance and provide a low-cost detector-on-a-chip platform. Such an instrument facilitates imaging applications with extremely low light and confined volumes. High sensitivity reading of small samples enables twodimensional imaging of DNA arrays and for tracking single molecules, and observing their dynamic behavior. In this work, we describe the performance of a prototype imaging detector of GPD pixels, with integrated active quenching for use in imaging of 2D objects using fluorescent labels. We demonstrate the integration of on-chip memory and a parallel readout interface for an array of CMOS GPD pixels as progress toward an all-digital detector on a chip. We also describe advances in pixel-level signal processing and solid-state photomultiplier developments.

  13. Design and implementation of IEEE 802.11ac MAC controller in 65 nm CMOS process

    NASA Astrophysics Data System (ADS)

    Peng, Cheng; Bin, Wu; Yong, Hei

    2016-02-01

    An IEEE-802.11ac-1*1 wireless LAN system-on-a-chip (SoC) that integrates an analog front end, a digital base-band processor and a media access controller has been implemented in 65 nm CMOS technology. It can provide significantly increased throughput, high efficiency rate selection, and fully backward compatibility with the existing 802.11a/n WLAN protocols. Especially the measured maximum throughput of UDP traffic can be up to 267 Mbps. Project supported by the National Great Specific Project of China (No. 2012ZX03004004_001).

  14. Analysis of pixel circuits in CMOS image sensors

    NASA Astrophysics Data System (ADS)

    Mei, Zou; Chen, Nan; Yao, Li-bin

    2015-04-01

    CMOS image sensors (CIS) have lower power consumption, lower cost and smaller size than CCD image sensors. However, generally CCDs have higher performance than CIS mainly due to lower noise. The pixel circuit used in CIS is the first part of the signal processing circuit and connected to photodiode directly, so its performance will greatly affect the CIS or even the whole imaging system. To achieve high performance, CMOS image sensors need advanced pixel circuits. There are many pixel circuits used in CIS, such as passive pixel sensor (PPS), 3T and 4T active pixel sensor (APS), capacitive transimpedance amplifier (CTIA), and passive pixel sensor (PPS). At first, the main performance parameters of each pixel structure including the noise, injection efficiency, sensitivity, power consumption, and stability of bias voltage are analyzed. Through the theoretical analysis of those pixel circuits, it is concluded that CTIA pixel circuit has good noise performance, high injection efficiency, stable photodiode bias, and high sensitivity with small integrator capacitor. Furthermore, the APS and CTIA pixel circuits are simulated in a standard 0.18-μm CMOS process and using a n-well/p-sub photodiode by SPICE and the simulation result confirms the theoretical analysis result. It shows the possibility that CMOS image sensors can be extended to a wide range of applications requiring high performance.

  15. Investigation of a seesaw structure for elevating the micro-optical device by CMOS-MEMS process

    NASA Astrophysics Data System (ADS)

    Tsai, Chien-Chung; Tsai, Shang-Che; Huang, Yi-Cheng

    2007-01-01

    The paper proposed a novel seesaw structure for elevating the micro optical device by the driving force of micro array thermal actuator, MATA. The effects of elevating structure, lateral connection arm structure, immobile structure and width of vertical connection arm on the maximum displacements and the variation of surface flatness of the elevated micro mirror surface varied with operation voltage are investigated. The motion behavior of the elevated micro mirror is stimulated and analyzed to get the maximum displacement and inclined angle of the device. The results demonstrate a pair of {1 x 2} parallel type MATA for the elevating structure, simple beam for the lateral connection arm structure, single thermal actuator for the immobile structure and 10μm for width of vertical connection arm are the optimum design for the micro optical device. The maximum displacement and inclined angle of the proposed micro optical device are 34.7μm and 10 °, respectively. The device is fabricated by Taiwan Semiconductor Manufacture Cooperation, TSMC 0.35μm 2P4M mixed signal model, based upon CIC CMOS-MEMS process. The paper will examine whether CIC CMOS-MEMS could fully support to fabricate the integrated component for MOEMS.

  16. An Acetone Microsensor with a Ring Oscillator Circuit Fabricated Using the Commercial 0.18 μm CMOS Process

    PubMed Central

    Yang, Ming-Zhi; Dai, Ching-Liang; Shih, Po-Jen

    2014-01-01

    This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive material, interdigitated electrodes and a polysilicon heater. The sensitive material is α-Fe2O3 synthesized by the hydrothermal method. The sensor requires a post-process to remove the sacrificial oxide layer between the interdigitated electrodes and to coat the α-Fe2O3 on the electrodes. When the sensitive material adsorbs acetone vapor, the sensor produces a change in capacitance. The ring oscillator circuit converts the capacitance of the sensor into the oscillation frequency output. The experimental results show that the output frequency of the acetone sensor changes from 128 to 100 MHz as the acetone concentration increases 1 to 70 ppm. PMID:25036331

  17. Micro ethanol sensors with a heater fabricated using the commercial 0.18 μm CMOS process.

    PubMed

    Liao, Wei-Zhen; Dai, Ching-Liang; Yang, Ming-Zhi

    2013-01-01

    The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 µm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated electrodes. The sensitive film is zinc oxide prepared by the sol-gel method, and it is coated on the interdigitated electrodes. The heater is located under the interdigitated electrodes, and it is used to supply a working temperature to the sensitive film. The sensor needs a post-processing step to remove the sacrificial oxide layer, and to coat zinc oxide on the interdigitated electrodes. When the sensitive film senses ethanol gas, the resistance of the sensor generates a change. An inverting amplifier circuit is utilized to convert the resistance variation of the sensor into the output voltage. Experiments show that the sensitivity of the ethanol sensor is 0.35 mV/ppm. PMID:24072022

  18. Ionization versus displacement damage effects in proton irradiated CMOS sensors manufactured in deep submicron process

    NASA Astrophysics Data System (ADS)

    Goiffon, V.; Magnan, P.; Saint-Pé, O.; Bernard, F.; Rolland, G.

    2009-10-01

    Proton irradiation effects have been studied on CMOS image sensors manufactured in a 0.18 μm technology dedicated to imaging. The ionizing dose and displacement damage effects were discriminated and localized thanks to 60Co irradiations and large photodiode reverse current measurements. The only degradation observed was a photodiode dark current increase. It was found that ionizing dose effects dominate this rise by inducing generation centers at the interface between shallow trench isolations and depleted silicon regions. Displacement damages are is responsible for a large degradation of dark current non-uniformity. This work suggests that designing a photodiode tolerant to ionizing radiation can mitigate an important part of proton irradiation effects.

  19. An Unassisted Low-Voltage-Trigger ESD Protection Structure in a 0.18-µm CMOS Process without Extra Process Cost

    NASA Astrophysics Data System (ADS)

    Li, Bing; Shan, Yi

    In order to quickly discharge the electrostatic discharge (ESD) energy, an unassisted low-voltage-trigger ESD protection structure is proposed in this work. Under transmission line pulsing (TLP) stress, the trigger voltage, turn-on speed and second breakdown current can be obviously improved, as compared with the traditional protection structure. Moreover there is no need to add any extra mask or do any process modification for the new structure. The proposed structure has been verified in foundry's 0.18-µm CMOS process.

  20. Impact of silicide layer on single photon avalanche diodes in a 130 nm CMOS process

    NASA Astrophysics Data System (ADS)

    Cheng, Zeng; Palubiak, Darek; Zheng, Xiaoqing; Deen, M. Jamal; Peng, Hao

    2016-09-01

    Single photon avalanche diode (SPAD) is an attractive solid-state optical detector that offers ultra-high photon sensitivity (down to the single photon level), high speed (sub-nanosecond dead time) and good timing performance (less than 100 ps). In this work, the impact of the silicide layer on SPAD’s characteristics, including the breakdown voltage, dark count rate (DCR), after-pulsing probability and photon detection efficiency (PDE) is investigated. For this purpose, two sets of SPAD structures in a standard 130 nm complementary metal oxide semiconductor (CMOS) process are designed, fabricated, measured and compared. A factor of 4.5 (minimum) in DCR reduction, and 5 in PDE improvements are observed when the silicide layer is removed from the SPAD structure. However, the after-pulsing probability of the SPAD without silicide layer is two times higher than its counterpart with silicide. The reasons for these changes will be discussed.

  1. Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process

    PubMed Central

    Liao, Wei-Zhen; Dai, Ching-Liang; Yang, Ming-Zhi

    2013-01-01

    The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated electrodes. The sensitive film is zinc oxide prepared by the sol-gel method, and it is coated on the interdigitated electrodes. The heater is located under the interdigitated electrodes, and it is used to supply a working temperature to the sensitive film. The sensor needs a post-processing step to remove the sacrificial oxide layer, and to coat zinc oxide on the interdigitated electrodes. When the sensitive film senses ethanol gas, the resistance of the sensor generates a change. An inverting amplifier circuit is utilized to convert the resistance variation of the sensor into the output voltage. Experiments show that the sensitivity of the ethanol sensor is 0.35 mV/ppm. PMID:24072022

  2. Which Photodiode to Use: A Comparison of CMOS-Compatible Structures

    PubMed Central

    Murari, Kartikeya; Etienne-Cummings, Ralph; Thakor, Nitish; Cauwenberghs, Gert

    2010-01-01

    While great advances have been made in optimizing fabrication process technologies for solid state image sensors, the need remains to be able to fabricate high quality photosensors in standard CMOS processes. The quality metrics depend on both the pixel architecture and the photosensitive structure. This paper presents a comparison of three photodiode structures in terms of spectral sensitivity, noise and dark current. The three structures are n+/p-sub, n-well/p-sub and p+/n-well/p-sub. All structures were fabricated in a 0.5 μm 3-metal, 2-poly, n-well process and shared the same pixel and readout architectures. Two pixel structures were fabricated—the standard three transistor active pixel sensor, where the output depends on the photodiode capacitance, and one incorporating an in-pixel capacitive transimpedance amplifier where the output is dependent only on a designed feedback capacitor. The n-well/p-sub diode performed best in terms of sensitivity (an improvement of 3.5 × and 1.6 × over the n+/p-sub and p+/n-well/p-sub diodes, respectively) and signal-to-noise ratio (1.5 × and 1.2 × improvement over the n+/p-sub and p+/n-well/p-sub diodes, respectively) while the p+/n-well/p-sub diode had the minimum (33% compared to other two structures) dark current for a given sensitivity. PMID:20454596

  3. Designing a ring-VCO for RFID transponders in 0.18 μm CMOS process.

    PubMed

    Jalil, Jubayer; Reaz, Mamun Bin Ibne; Bhuiyan, Mohammad Arif Sobhan; Rahman, Labonnah Farzana; Chang, Tae Gyu

    2014-01-01

    In radio frequency identification (RFID) systems, performance degradation of phase locked loops (PLLs) mainly occurs due to high phase noise of voltage-controlled oscillators (VCOs). This paper proposes a low power, low phase noise ring-VCO developed for 2.42 GHz operated active RFID transponders compatible with IEEE 802.11 b/g, Bluetooth, and Zigbee protocols. For ease of integration and implementation of the module in tiny die area, a novel pseudodifferential delay cell based 3-stage ring oscillator has been introduced to fabricate the ring-VCO. In CMOS technology, 0.18 μm process is adopted for designing the circuit with 1.5 V power supply. The postlayout simulated results show that the proposed oscillator works in the tuning range of 0.5-2.54 GHz and dissipates 2.47 mW of power. It exhibits a phase noise of -126.62 dBc/Hz at 25 MHz offset from 2.42 GHz carrier frequency. PMID:24587731

  4. PNP PIN bipolar phototransistors for high-speed applications built in a 180 nm CMOS process

    PubMed Central

    Kostov, P.; Gaberl, W.; Hofbauer, M.; Zimmermann, H.

    2012-01-01

    This work reports on three speed optimized pnp bipolar phototransistors build in a standard 180 nm CMOS process using a special starting wafer. The starting wafer consists of a low doped p epitaxial layer on top of the p substrate. This low doped p epitaxial layer leads to a thick space-charge region between base and collector and thus to a high −3 dB bandwidth at low collector–emitter voltages. For a further increase of the bandwidth the presented phototransistors were designed with small emitter areas resulting in a small base-emitter capacitance. The three presented phototransistors were implemented in sizes of 40 × 40 μm2 and 100 × 100 μm2. Optical DC and AC measurements at 410 nm, 675 nm and 850 nm were done for phototransistor characterization. Due to the speed optimized design and the layer structure of the phototransistors, bandwidths up to 76.9 MHz and dynamic responsivities up to 2.89 A/W were achieved. Furthermore simulations of the electric field strength and space-charge regions were done. PMID:23482349

  5. Designing a Ring-VCO for RFID Transponders in 0.18 μm CMOS Process

    PubMed Central

    Jalil, Jubayer; Reaz, Mamun Bin Ibne; Bhuiyan, Mohammad Arif Sobhan; Rahman, Labonnah Farzana; Chang, Tae Gyu

    2014-01-01

    In radio frequency identification (RFID) systems, performance degradation of phase locked loops (PLLs) mainly occurs due to high phase noise of voltage-controlled oscillators (VCOs). This paper proposes a low power, low phase noise ring-VCO developed for 2.42 GHz operated active RFID transponders compatible with IEEE 802.11 b/g, Bluetooth, and Zigbee protocols. For ease of integration and implementation of the module in tiny die area, a novel pseudodifferential delay cell based 3-stage ring oscillator has been introduced to fabricate the ring-VCO. In CMOS technology, 0.18 μm process is adopted for designing the circuit with 1.5 V power supply. The postlayout simulated results show that the proposed oscillator works in the tuning range of 0.5–2.54 GHz and dissipates 2.47 mW of power. It exhibits a phase noise of −126.62 dBc/Hz at 25 MHz offset from 2.42 GHz carrier frequency. PMID:24587731

  6. A 0.1–1.5 GHz, low jitter, area efficient PLL in 55-nm CMOS process

    NASA Astrophysics Data System (ADS)

    Bo, Zhong; Zhangming, Zhu

    2016-05-01

    A 0.1–1.5 GHz, 3.07 pS root mean squares (RMS) jitter, area efficient phase locked loop (PLL) with multiphase clock outputs is presented in this paper. The size of capacitor in the low pass filter (LPF) is significantly decreased by implementing a dual path charge pump (CP) technique in this PLL. Subject to specified power consumption, a novel optimization method is introduced to optimize the transistor size in the voltage control oscillator (VCO), CP and phase/frequency detector (PFD) in order to minimize clock jitter. This method could improve 3–6 dBc/Hz phase noise. The proposed PLL has been fabricated in 55 nm CMOS process with an integrated 16 pF metal–oxide–metal (MOM) capacitor, occupies 0.05 mm2 silicon area, the measured total power consumption is 2.8 mW @ 1.5 GHz and the phase noise is ‑102 dBc/Hz @ 1 MHz offset frequency. Project supported by the National Natural Science Foundation of China (Nos. 61234002, 61322405, 61306044, 61376033) and the National High-Tech Program of China (No. 2013AA014103).

  7. Radiation Characteristics of a 0.11 Micrometer Modified Commercial CMOS Process

    NASA Technical Reports Server (NTRS)

    Poivey, Christian; Kim, Hak; Berg, Melanie D.; Forney, Jim; Seidleck, Christina; Vilchis, Miguel A.; Phan, Anthony; Irwin, Tim; LaBel, Kenneth A.; Saigusa, Rajan K.; Mirabedini, Mohammad R.; Finlinson, Rick; Suvkhanov, Agajan; Hornback, Verne; Sung, Jun; Tung, Jeffrey

    2006-01-01

    We present radiation data, Total Ionizing Dose and Single Event Effects, on the LSI Logic 0.11 micron commercial process and two modified versions of this process. Modified versions include a buried layer to guarantee Single Event Latchup immunity.

  8. Progress in voltage and current mode on-chip analog-to-digital converters for CMOS image sensors

    NASA Astrophysics Data System (ADS)

    Panicacci, Roger; Pain, Bedabrata; Zhou, Zhimin; Nakamura, Junichi; Fossum, Eric R.

    1996-03-01

    Two 8 bit successive approximation analog-to-digital converter (ADC) designs and a 12 bit current mode incremental sigma delta ((Sigma) -(Delta) ) ADC have been designed, fabricated, and tested. The successive approximation test chip designs are compatible with active pixel sensor (APS) column parallel architectures with a 20.4 micrometers pitch in a 1.2 micrometers n-well CMOS process and a 40 micrometers pitch in a 2 micrometers n-well CMOS process. The successive approximation designs consume as little as 49 (mu) W at a 500 KHz conversion rate meeting the low power requirements inherent in column parallel architectures. The current mode incremental (Sigma) -(Delta) ADC test chip is designed to be multiplexed among 8 columns in a semi-column parallel current mode APS architecture. The higher accuracy ADC consumes 800 (mu) W at a 5 KHz conversion rate.

  9. Low-cost uncooled infrared detector arrays in standard CMOS

    NASA Astrophysics Data System (ADS)

    Eminoglu, Selim; Tanrikulu, M. Y.; Akin, Tayfun

    2003-09-01

    This paper reports the development of a low-cost 128 x 128 uncooled infrared focal plane array (FPA) based on suspended and thermally isolated CMOS p+-active/n-well diodes. The FPA is fabricated using a standard 0.35 μm CMOS process followed by simple post-CMOS bulk micromachining that does not require any critical lithography or complicated deposition steps; and therefore, the cost of the uncooled FPA is almost equal to the cost of the CMOS chip. The post-CMOS fabrication steps include an RIE etching to reach the bulk silicon and an anisotropic silicon etching to obtain thermally isolated pixels. During the RIE etching, CMOS metal layers are used as masking layers, and therefore, narrow openings such as 2 μm can be defined between the support arms. This approach allows achieving small pixel size of 40 μm x 40 μm with a fill factor of 44%. The FPA is scanned at 30 fps by monolithically integrated multi-channel parallel readout circuitry which is composed of low-noise differential transconductance amplifiers, switched capacitor (SC) integrators, sample-and-hold circuits, and various other circuit blocks for reducing the effects of variations in detector voltage and operating temperature. The fabricated detector has a temperature coefficient of -2 mV/K, a thermal conductance value of 1.8 x 10-7 W/K, and a thermal time constant value of 36 msec, providing a measured DC responsivity (R) of 4970 V/W under continuous bias. Measured detector noise is 0.69 μV in 8 kHz bandwidth at 30 fps scanning rate, resulting a measured detectivity (D*) of 9.7 x 108 cm√HzW. Contribution of the 1/f noise component is found to be negligible due to the single crystal nature of the silicon n-well and its low value at low bias levels. The noise of the readout circuit is measured as 0.76 μV, resulting in an expected NETD value of 1 K when scanned at 30 fps using f=1 optics. This NETD value can be decreased below 350 mK by decreasing the electrical bandwidth with the help of increased

  10. Charged particle detection performances of CMOS pixel sensors produced in a 0.18 μm process with a high resistivity epitaxial layer

    NASA Astrophysics Data System (ADS)

    Senyukov, S.; Baudot, J.; Besson, A.; Claus, G.; Cousin, L.; Dorokhov, A.; Dulinski, W.; Goffe, M.; Hu-Guo, C.; Winter, M.

    2013-12-01

    The apparatus of the ALICE experiment at CERN will be upgraded in 2017/18 during the second long shutdown of the LHC (LS2). A major motivation for this upgrade is to extend the physics reach for charmed and beauty particles down to low transverse momenta. This requires a substantial improvement of the spatial resolution and the data rate capability of the ALICE Inner Tracking System (ITS). To achieve this goal, the new ITS will be equipped with 50 μm thin CMOS Pixel Sensors (CPS) covering either the three innermost layers or all the 7 layers of the detector. The CPS being developed for the ITS upgrade at IPHC (Strasbourg) is derived from the MIMOSA 28 sensor realised for the STAR-PXL at RHIC in a 0.35 μm CMOS process. In order to satisfy the ITS upgrade requirements in terms of readout speed and radiation tolerance, a CMOS process with a reduced feature size and a high resistivity epitaxial layer should be exploited. In this respect, the charged particle detection performance and radiation hardness of the TowerJazz 0.18 μm CMOS process were studied with the help of the first prototype chip MIMOSA 32. The beam tests performed with negative pions of 120 GeV/c at the CERN-SPS allowed to measure a signal-to-noise ratio (SNR) for the non-irradiated chip in the range between 22 and 32 depending on the pixel design. The chip irradiated with the combined dose of 1 MRad and 1013neq /cm2 was observed to yield an SNR ranging between 11 and 23 for coolant temperatures varying from 15 °C to 30 °C. These SNR values were measured to result in particle detection efficiencies above 99.5% and 98% before and after irradiation, respectively. These satisfactory results allow to validate the TowerJazz 0.18 μm CMOS process for the ALICE ITS upgrade.

  11. CMOS Integrated Carbon Nanotube Sensor

    SciTech Connect

    Perez, M. S.; Lerner, B.; Boselli, A.; Lamagna, A.; Obregon, P. D. Pareja; Julian, P. M.; Mandolesi, P. S.; Buffa, F. A.

    2009-05-23

    Recently carbon nanotubes (CNTs) have been gaining their importance as sensors for gases, temperature and chemicals. Advances in fabrication processes simplify the formation of CNT sensor on silicon substrate. We have integrated single wall carbon nanotubes (SWCNTs) with complementary metal oxide semiconductor process (CMOS) to produce a chip sensor system. The sensor prototype was designed and fabricated using a 0.30 um CMOS process. The main advantage is that the device has a voltage amplifier so the electrical measure can be taken and amplified inside the sensor. When the conductance of the SWCNTs varies in response to media changes, this is observed as a variation in the output tension accordingly.

  12. On the processing aspects of high performance hybrid backside illuminated CMOS imagers

    NASA Astrophysics Data System (ADS)

    De Vos, Joeri; De Munck, Koen; Minoglou, Kiki; Ramachandra Rao, Padmakumar; Akif Erismis, Mehmet; De Moor, Piet; Sabuncuoglu Tezcan, Deniz

    2011-07-01

    In this paper we present a successful integration scheme of a backside (BS) illuminated 1024 × 1024 pixel, 30 µm thin, sensor array that is flip chipped on a read-out IC die with 10 µm diameter indium micro bumps, where the pixel pitch is 22.5 µm. A novel BS alignment strategy to avoid Pyrex glass as a temporary carrier for wafer thinning is described. Pyrex is namely not compatible in a high-end Si process environment due to its fragile and contaminating nature. Further special attention is given to critical steps leading toward high broadband quantum efficiency of 80-90%. It is also shown that through the introduction of high aspect ratio pixel separating trenches, inter-pixel electrical crosstalk can be avoided.

  13. High Electron Mobility Transistor Structures on Sapphire Substrates Using CMOS Compatible Processing Techniques

    NASA Technical Reports Server (NTRS)

    Mueller, Carl; Alterovitz, Samuel; Croke, Edward; Ponchak, George

    2004-01-01

    System-on-a-chip (SOC) processes are under intense development for high-speed, high frequency transceiver circuitry. As frequencies, data rates, and circuit complexity increases, the need for substrates that enable high-speed analog operation, low-power digital circuitry, and excellent isolation between devices becomes increasingly critical. SiGe/Si modulation doped field effect transistors (MODFETs) with high carrier mobilities are currently under development to meet the active RF device needs. However, as the substrate normally used is Si, the low-to-modest substrate resistivity causes large losses in the passive elements required for a complete high frequency circuit. These losses are projected to become increasingly troublesome as device frequencies progress to the Ku-band (12 - 18 GHz) and beyond. Sapphire is an excellent substrate for high frequency SOC designs because it supports excellent both active and passive RF device performance, as well as low-power digital operations. We are developing high electron mobility SiGe/Si transistor structures on r-plane sapphire, using either in-situ grown n-MODFET structures or ion-implanted high electron mobility transistor (HEMT) structures. Advantages of the MODFET structures include high electron mobilities at all temperatures (relative to ion-implanted HEMT structures), with mobility continuously improving to cryogenic temperatures. We have measured electron mobilities over 1,200 and 13,000 sq cm/V-sec at room temperature and 0.25 K, respectively in MODFET structures. The electron carrier densities were 1.6 and 1.33 x 10(exp 12)/sq cm at room and liquid helium temperature, respectively, denoting excellent carrier confinement. Using this technique, we have observed electron mobilities as high as 900 sq cm/V-sec at room temperature at a carrier density of 1.3 x 10(exp 12)/sq cm. The temperature dependence of mobility for both the MODFET and HEMT structures provides insights into the mechanisms that allow for enhanced

  14. A 75-ps Gated CMOS Image Sensor with Low Parasitic Light Sensitivity

    PubMed Central

    Zhang, Fan; Niu, Hanben

    2016-01-01

    In this study, a 40 × 48 pixel global shutter complementary metal-oxide-semiconductor (CMOS) image sensor with an adjustable shutter time as low as 75 ps was implemented using a 0.5-μm mixed-signal CMOS process. The implementation consisted of a continuous contact ring around each p+/n-well photodiode in the pixel array in order to apply sufficient light shielding. The parasitic light sensitivity of the in-pixel storage node was measured to be 1/8.5 × 107 when illuminated by a 405-nm diode laser and 1/1.4 × 104 when illuminated by a 650-nm diode laser. The pixel pitch was 24 μm, the size of the square p+/n-well photodiode in each pixel was 7 μm per side, the measured random readout noise was 217 e− rms, and the measured dynamic range of the pixel of the designed chip was 5500:1. The type of gated CMOS image sensor (CIS) that is proposed here can be used in ultra-fast framing cameras to observe non-repeatable fast-evolving phenomena. PMID:27367699

  15. Simulation, fabrication and characterization of a 3.3 V flash ZE 2PROM array implemented in a 0.8 μm CMOS process

    NASA Astrophysics Data System (ADS)

    Ranaweera, J.; Ng, W. T.; Salama, C. A. T.

    1999-02-01

    This paper describes a Zener based flash memory cell (ZE 2PROM), programmed from hot electrons generated by a heavily doped reverse biased p +n + junction attached to the drain. The cell can be implemented in a NOR type memory array. It uses an orthogonal write technique to achieve fast programming with low power dissipation and reduced drain disturbance. The modeling of the charge transfer behavior of the flash ZE 2PROM cell is also done to describe the charging and discharging of the floating gate during programming and erasing. The flash ZE 2PROM arrays were implemented in a 0.8 μm lithography CMOS process flow in which the n-LDD step was replaced with a one sided p + boron implant with a doping level of ˜10 19 cm -3. This minor change to a standard CMOS process, makes the concept highly attractive for embedded memory applications. A programming time of 850 ns at 3.3 V supply was achieved on fabricated test devices.

  16. Development of CMOS Active Pixel Image Sensors for Low Cost Commercial Applications

    NASA Technical Reports Server (NTRS)

    Fossum, E.; Gee, R.; Kemeny, S.; Kim, Q.; Mendis, S.; Nakamura, J.; Nixon, R.; Ortiz, M.; Pain, B.; Zhou, Z.; Ackland, B.; Dickinson, A.; Eid, E.; Inglis, D.

    1994-01-01

    This paper describes ongoing research and development of CMOS active pixel image sensors for low cost commercial applications. A number of sensor designs have been fabricated and tested in both p-well and n-well technologies. Major elements in the development of the sensor include on-chip analog signal processing circuits for the reduction of fixed pattern noise, on-chip timing and control circuits and on-chip analog-to-digital conversion (ADC). Recent results and continuing efforts in these areas will be presented.

  17. Fabrication of CMOS image sensors

    NASA Astrophysics Data System (ADS)

    Malinovich, Yacov; Koltin, Ephie; Choen, David; Shkuri, Moshe; Ben-Simon, Meir

    1999-04-01

    In order to provide its customers with sub-micron CMOS fabrication solutions for imaging applications, Tower Semiconductor initiated a project to characterize the optical parameters of Tower's 0.5-micron process. A special characterization test chip was processed using the TS50 process. The results confirmed a high quality process for optical applications. Perhaps the most important result is the process' very low dark current, of 30-50 pA/cm2, using the entire window of process. This very low dark current characteristic was confirmed for a variety of pixel architectures. Additionally, we have succeeded to reduce and virtually eliminate the white spots on large sensor arrays. As a foundry Tower needs to support fabrication of many different imaging products. Therefore we have developed a fabrication methodology that is adjusted to the special needs of optical applications. In order to establish in-line process monitoring of the optical parameters, Tower places a scribe line optical test chip that enables wafer level measurements of the most important parameters, ensuring the optical quality and repeatability of the process. We have developed complementary capabilities like in house deposition of color filter and fabrication of very large are dice using sub-micron CMOS technologies. Shellcase and Tower are currently developing a new CMOS image sensor optical package.

  18. Graphene/Si CMOS Hybrid Hall Integrated Circuits

    PubMed Central

    Huang, Le; Xu, Huilong; Zhang, Zhiyong; Chen, Chengying; Jiang, Jianhua; Ma, Xiaomeng; Chen, Bingyan; Li, Zishen; Zhong, Hua; Peng, Lian-Mao

    2014-01-01

    Graphene/silicon CMOS hybrid integrated circuits (ICs) should provide powerful functions which combines the ultra-high carrier mobility of graphene and the sophisticated functions of silicon CMOS ICs. But it is difficult to integrate these two kinds of heterogeneous devices on a single chip. In this work a low temperature process is developed for integrating graphene devices onto silicon CMOS ICs for the first time, and a high performance graphene/CMOS hybrid Hall IC is demonstrated. Signal amplifying/process ICs are manufactured via commercial 0.18 um silicon CMOS technology, and graphene Hall elements (GHEs) are fabricated on top of the passivation layer of the CMOS chip via a low-temperature micro-fabrication process. The sensitivity of the GHE on CMOS chip is further improved by integrating the GHE with the CMOS amplifier on the Si chip. This work not only paves the way to fabricate graphene/Si CMOS Hall ICs with much higher performance than that of conventional Hall ICs, but also provides a general method for scalable integration of graphene devices with silicon CMOS ICs via a low-temperature process. PMID:24998222

  19. 5A Zirconium Dioxide Ammonia Microsensor Integrated with a Readout Circuit Manufactured Using the 0.18 μm CMOS Process

    PubMed Central

    Lin, Guan-Ming; Dai, Ching-Liang; Yang, Ming-Zhi

    2013-01-01

    The study presents an ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated sensor chip consists of a heater, an ammonia sensor and a readout circuit. The ammonia sensor is constructed by a sensitive film and the interdigitated electrodes. The sensitive film is zirconium dioxide that is coated on the interdigitated electrodes. The heater is used to provide a working temperature to the sensitive film. A post-process is employed to remove the sacrificial layer and to coat zirconium dioxide on the sensor. When the sensitive film adsorbs or desorbs ammonia gas, the sensor produces a change in resistance. The readout circuit converts the resistance variation of the sensor into the output voltage. The experiments show that the integrated ammonia sensor has a sensitivity of 4.1 mV/ppm. PMID:23503294

  20. Design of High Speed and Low Offset Dynamic Latch Comparator in 0.18 µm CMOS Process

    PubMed Central

    Rahman, Labonnah Farzana; Reaz, Mamun Bin Ibne; Yin, Chia Chieu; Ali, Mohammad Alauddin Mohammad; Marufuzzaman, Mohammad

    2014-01-01

    The cross-coupled circuit mechanism based dynamic latch comparator is presented in this research. The comparator is designed using differential input stages with regenerative S-R latch to achieve lower offset, lower power, higher speed and higher resolution. In order to decrease circuit complexity, a comparator should maintain power, speed, resolution and offset-voltage properly. Simulations show that this novel dynamic latch comparator designed in 0.18 µm CMOS technology achieves 3.44 mV resolution with 8 bit precision at a frequency of 50 MHz while dissipating 158.5 µW from 1.8 V supply and 88.05 µA average current. Moreover, the proposed design propagates as fast as 4.2 nS with energy efficiency of 0.7 fJ/conversion-step. Additionally, the core circuit layout only occupies 0.008 mm2. PMID:25299266

  1. CAOS-CMOS camera.

    PubMed

    Riza, Nabeel A; La Torre, Juan Pablo; Amin, M Junaid

    2016-06-13

    Proposed and experimentally demonstrated is the CAOS-CMOS camera design that combines the coded access optical sensor (CAOS) imager platform with the CMOS multi-pixel optical sensor. The unique CAOS-CMOS camera engages the classic CMOS sensor light staring mode with the time-frequency-space agile pixel CAOS imager mode within one programmable optical unit to realize a high dynamic range imager for extreme light contrast conditions. The experimentally demonstrated CAOS-CMOS camera is built using a digital micromirror device, a silicon point-photo-detector with a variable gain amplifier, and a silicon CMOS sensor with a maximum rated 51.3 dB dynamic range. White light imaging of three different brightness simultaneously viewed targets, that is not possible by the CMOS sensor, is achieved by the CAOS-CMOS camera demonstrating an 82.06 dB dynamic range. Applications for the camera include industrial machine vision, welding, laser analysis, automotive, night vision, surveillance and multispectral military systems. PMID:27410361

  2. A CMOS In-Pixel CTIA High Sensitivity Fluorescence Imager

    PubMed Central

    Murari, Kartikeya; Etienne-Cummings, Ralph; Thakor, Nitish; Cauwenberghs, Gert

    2012-01-01

    Traditionally, charge coupled device (CCD) based image sensors have held sway over the field of biomedical imaging. Complementary metal oxide semiconductor (CMOS) based imagers so far lack sensitivity leading to poor low-light imaging. Certain applications including our work on animal-mountable systems for imaging in awake and unrestrained rodents require the high sensitivity and image quality of CCDs and the low power consumption, flexibility and compactness of CMOS imagers. We present a 132×124 high sensitivity imager array with a 20.1 μm pixel pitch fabricated in a standard 0.5 μ CMOS process. The chip incorporates n-well/p-sub photodiodes, capacitive transimpedance amplifier (CTIA) based in-pixel amplification, pixel scanners and delta differencing circuits. The 5-transistor all-nMOS pixel interfaces with peripheral pMOS transistors for column-parallel CTIA. At 70 fps, the array has a minimum detectable signal of 4 nW/cm2 at a wavelength of 450 nm while consuming 718 μA from a 3.3 V supply. Peak signal to noise ratio (SNR) was 44 dB at an incident intensity of 1 μW/cm2. Implementing 4×4 binning allowed the frame rate to be increased to 675 fps. Alternately, sensitivity could be increased to detect about 0.8 nW/cm2 while maintaining 70 fps. The chip was used to image single cell fluorescence at 28 fps with an average SNR of 32 dB. For comparison, a cooled CCD camera imaged the same cell at 20 fps with an average SNR of 33.2 dB under the same illumination while consuming over a watt. PMID:23136624

  3. A microfluidic device integrating dual CMOS polysilicon nanowire sensors for on-chip whole blood processing and simultaneous detection of multiple analytes.

    PubMed

    Kuan, Da-Han; Wang, I-Shun; Lin, Jiun-Rue; Yang, Chao-Han; Huang, Chi-Hsien; Lin, Yen-Hung; Lin, Chih-Ting; Huang, Nien-Tsu

    2016-08-01

    The hemoglobin-A1c test, measuring the ratio of glycated hemoglobin (HbA1c) to hemoglobin (Hb) levels, has been a standard assay in diabetes diagnosis that removes the day-to-day glucose level variation. Currently, the HbA1c test is restricted to hospitals and central laboratories due to the laborious, time-consuming whole blood processing and bulky instruments. In this paper, we have developed a microfluidic device integrating dual CMOS polysilicon nanowire sensors (MINS) for on-chip whole blood processing and simultaneous detection of multiple analytes. The micromachined polymethylmethacrylate (PMMA) microfluidic device consisted of a serpentine microchannel with multiple dam structures designed for non-lysed cells or debris trapping, uniform plasma/buffer mixing and dilution. The CMOS-fabricated polysilicon nanowire sensors integrated with the microfluidic device were designed for the simultaneous, label-free electrical detection of multiple analytes. Our study first measured the Hb and HbA1c levels in 11 clinical samples via these nanowire sensors. The results were compared with those of standard Hb and HbA1c measurement methods (Hb: the sodium lauryl sulfate hemoglobin detection method; HbA1c: cation-exchange high-performance liquid chromatography) and showed comparable outcomes. Finally, we successfully demonstrated the efficacy of the MINS device's on-chip whole blood processing followed by simultaneous Hb and HbA1c measurement in a clinical sample. Compared to current Hb and HbA1c sensing instruments, the MINS platform is compact and can simultaneously detect two analytes with only 5 μL of whole blood, which corresponds to a 300-fold blood volume reduction. The total assay time, including the in situ sample processing and analyte detection, was just 30 minutes. Based on its on-chip whole blood processing and simultaneous multiple analyte detection functionalities with a lower sample volume requirement and shorter process time, the MINS device can be

  4. Ion traps fabricated in a CMOS foundry

    SciTech Connect

    Mehta, K. K.; Ram, R. J.; Eltony, A. M.; Chuang, I. L.; Bruzewicz, C. D.; Sage, J. M. Chiaverini, J.

    2014-07-28

    We demonstrate trapping in a surface-electrode ion trap fabricated in a 90-nm CMOS (complementary metal-oxide-semiconductor) foundry process utilizing the top metal layer of the process for the trap electrodes. The process includes doped active regions and metal interconnect layers, allowing for co-fabrication of standard CMOS circuitry as well as devices for optical control and measurement. With one of the interconnect layers defining a ground plane between the trap electrode layer and the p-type doped silicon substrate, ion loading is robust and trapping is stable. We measure a motional heating rate comparable to those seen in surface-electrode traps of similar size. This demonstration of scalable quantum computing hardware utilizing a commercial CMOS process opens the door to integration and co-fabrication of electronics and photonics for large-scale quantum processing in trapped-ion arrays.

  5. A diffractive multispectral image sensor with on- and off-die signal processing and on-die optics in 0.18-micron CMOS

    NASA Astrophysics Data System (ADS)

    Thomas, Christopher; Hornsey, Richard

    2007-02-01

    On-die optics have been proposed for imaging, spectral analysis, and communications applications. These systems typically require extra process steps to fabricate on-die optics. Fabrication of diffractive optics using the metal layers in commercial CMOS processes circumvents this requirement, but produces optical elements with poor imaging behavior. This paper discusses the application of Wiener filtering to reconstruction of images suffering from blurring and chromatic aberration, and to identification of the position and wavelength of point sources. Adaptation of this approach to analog and digital FIR implementations are discussed, and the design of a multispectral imaging sensor using analog FIR filtering is presented. Simulations indicate that off-die post-processing can determine point source wavelength to within 5% and position to within +/-0.05 radian, and resolve features 0.4 radian in size in images illuminated by white light. The analog hardware implementation is simulated to resolve features 0.4 radian in size illuminated by monochromatic light, and 0.7 radian with white light.

  6. Development of cryogenic readout electronics using fully-depleted-silicon-on-insulator CMOS process for future space borne far-infrared image sensors

    NASA Astrophysics Data System (ADS)

    Nagata, Hirohisa; Wada, Takehiko; Ikeda, Hirokazu; Arai, Yasuo; Ohno, Morifumi

    2009-12-01

    We measured the static characteristics and noise spectra of FD-SOI-CMOS at liquid helium temperature where many bulk-CMOS transistors suffer from anomalous behaviors on the current-voltage curves such as kink phenomena. The test results showed that the static characteristics depend on the layouts of the FD-SOI-CMOS transistor. While a body floating FD-SOI-CMOS transistor showed strong anomalous effects on the I-V curves, body-tied and ST ones showed much better static characteristics than the body floating one. Using the characteristics derived from the FET measurements, we show that a low power and high gain preamplifier suitable for far-infrared detectors can be designed.

  7. ESD protection design for advanced CMOS

    NASA Astrophysics Data System (ADS)

    Huang, Jin B.; Wang, Gewen

    2001-10-01

    ESD effects in integrated circuits have become a major concern as today's technologies shrink to sub-micron/deep- sub-micron dimensions. The thinner gate oxide and shallower junction depth used in the advanced technologies make them very vulnerable to ESD damages. The advanced techniques like silicidation and STI (shallow trench insulation) used for improving other device performances make ESD design even more challenging. For non-silicided technologies, a certain DCGS (drain contact to gate edge spacing) is needed to achieve ESD hardness for nMOS output drivers and nMOS protection transistors. The typical DCGS values are 4-5um and 2-3um for 0.5um and 0.25um CMOS, respectively. The silicidation reduces the ballast resistance provided by DCGS with at least a factor of 10. As a result, scaling of the ESD performance with device width is lost and even zero ESD performance is reported for standard silicided devices. The device level ESD design is focused in this paper, which includes GGNMOS (gate grounded NMOS) and GCNMOS (gate coupled NMOS). The device level ESD testing including TLP (transmission line pulse) is given. Several ESD issues caused by advanced technologies have been pointed out. The possible solutions have been developed and summarized including silicide blocking, process optimization, back-end ballasting, and new protection scheme, dummy gate/n-well resistor ballsting, etc. Some of them require process cost increase, and others provide novel, compact, and simple design but involving royalty/IP (intellectual property) issue. Circuit level ESD design and layout design considerations are covered. The top-level ESD protection strategies are also given.

  8. Radiation tolerant back biased CMOS VLSI

    NASA Technical Reports Server (NTRS)

    Maki, Gary K. (Inventor); Gambles, Jody W. (Inventor); Hass, Kenneth J. (Inventor)

    2003-01-01

    A CMOS circuit formed in a semiconductor substrate having improved immunity to total ionizing dose radiation, improved immunity to radiation induced latch up, and improved immunity to a single event upset. The architecture of the present invention can be utilized with the n-well, p-well, or dual-well processes. For example, a preferred embodiment of the present invention is described relative to a p-well process wherein the p-well is formed in an n-type substrate. A network of NMOS transistors is formed in the p-well, and a network of PMOS transistors is formed in the n-type substrate. A contact is electrically coupled to the p-well region and is coupled to first means for independently controlling the voltage in the p-well region. Another contact is electrically coupled to the n-type substrate and is coupled to second means for independently controlling the voltage in the n-type substrate. By controlling the p-well voltage, the effective threshold voltages of the n-channel transistors both drawn and parasitic can be dynamically tuned. Likewise, by controlling the n-type substrate, the effective threshold voltages of the p-channel transistors both drawn and parasitic can also be dynamically tuned. Preferably, by optimizing the threshold voltages of the n-channel and p-channel transistors, the total ionizing dose radiation effect will be neutralized and lower supply voltages can be utilized for the circuit which would result in the circuit requiring less power.

  9. Characterization and reliability of CMOS microstructures

    NASA Astrophysics Data System (ADS)

    Fedder, Gary K.; Blanton, Ronald D. S.

    1999-08-01

    This paper provides an overview of high-aspect-ratio CMOS micromachining, focusing on materials characterization, reliability, and fault analysis. Composite microstrutural beam widths and gaps down to 1.2 micrometers are etched out of conventional CMOS dielectric, aluminum, and gate-polysilicon thin films using post-CMOS dry etching for both structural sidewall definition and for release from the substrate. Differences in stress between the multiple metal and dielectric layers cause vertical stress gradients and curl, while misalignment between layers causes lateral stress gradients and curl. Cracking is induced in a resonant fatigue structures at 620 MPa of repetitive stress after over 50 million cycles. Beams have withstood over 1.3 billion cycles at 124 MPa stress levels induced by electrostatic actuation. Failures due to process defects are classified according to the geometrical features of the defective structures. Relative probability of occurrence of each defect type is extracted from the process simulation results.

  10. Commercially developed mixed-signal CMOS process features for application in advanced ROICs in 0.18μm technology node

    NASA Astrophysics Data System (ADS)

    Kar-Roy, Arjun; Hurwitz, Paul; Mann, Richard; Qamar, Yasir; Chaudhry, Samir; Zwingman, Robert; Howard, David; Racanelli, Marco

    2012-06-01

    Increasingly complex specifications for next-generation focal plane arrays (FPAs) require smaller pixels, larger array sizes, reduced power consumption and lower cost. We have previously reported on the favorable features available in the commercially available TowerJazz CA18 0.18μm mixed-signal CMOS technology platform for advanced read-out integrated circuit (ROIC) applications. In his paper, new devices in development for commercial purposes and which may have applications in advanced ROICs are reported. First, results of buried-channel 3.3V field effect transistors (FETs) are detailed. The buried-channel pFETs show flicker (1/f) noise reductions of ~5X in comparison to surface-channel pFETs along with a significant reduction of the body constant parameter. The buried-channel nFETs show ~2X reduction of 1/f noise versus surface-channel nFETs. Additional reduced threshold voltage nFETs and pFETs are also described. Second, a high-density capacitor solution with a four-stacked linear (metal-insulator-metal) MIM capacitor having capacitance density of 8fF/μm2 is reported. Additional stacking with MOS capacitor in a 5V tolerant process results in >50fC/μm2 charge density. Finally, one-time programmable (OTP) and multi-time programmable (MTP) non-volatile memory options in the CA18 technology platform are outlined.

  11. SEMICONDUCTOR INTEGRATED CIRCUITS: A fully integrated UHF RFID reader SoC for handheld applications in the 0.18 μm CMOS process

    NASA Astrophysics Data System (ADS)

    Jingchao, Wang; Chun, Zhang; Zhihua, Wang

    2010-08-01

    A low cost fully integrated single-chip UHF radio frequency identification (RFID) reader SoC for short distance handheld applications is presented. The SoC integrates all building blocks—including an RF transceiver, a PLL frequency synthesizer, a digital baseband and an MCU—in a 0.18 μm CMOS process. A high-linearity RX front-end is designed to handle the large self-interferer. A class-E power amplifier with high power efficiency is also integrated to fulfill the function of a UHF passive RFID reader. The measured maximum output power of the transmitter is 20.28 dBm and the measured receiver sensitivity is -60 dBm. The digital baseband including MCU core consumes 3.91 mW with a clock of 10 MHz and the analog part including power amplifier consumes 368.4 mW. The chip has a die area of 5.1 × 3.8 mm2 including pads.

  12. A 0.23 pJ 11.05-bit ENOB 125-MS/s pipelined ADC in a 0.18 μm CMOS process

    NASA Astrophysics Data System (ADS)

    Yong, Wang; Jianyun, Zhang; Rui, Yin; Yuhang, Zhao; Wei, Zhang

    2015-05-01

    This paper describes a 12-bit 125-MS/s pipelined analog-to-digital converter (ADC) that is implemented in a 0.18 μm CMOS process. A gate-bootstrapping switch is used as the bottom-sampling switch in the first stage to enhance the sampling linearity. The measured differential and integral nonlinearities of the prototype are less than 0.79 least significant bit (LSB) and 0.86 LSB, respectively, at the full sampling rate. The ADC exhibits an effective number of bits (ENOB) of more than 11.05 bits at the input frequency of 10.5 MHz. The ADC also achieves a 10.5 bits ENOB with the Nyquist input frequency at the full sample rate. In addition, the ADC consumes 62 mW from a 1.9 V power supply and occupies 1.17 mm2, which includes an on-chip reference buffer. The figure-of-merit of this ADC is 0.23 pJ/step. Project supported by the Foundation of Shanghai Municipal Commission of Economy and Informatization (No. 130311).

  13. Integration of GaAs, GaN, and Si-CMOS on a common 200 mm Si substrate through multilayer transfer process

    NASA Astrophysics Data System (ADS)

    Lee, Kwang Hong; Bao, Shuyu; Zhang, Li; Kohen, David; Fitzgerald, Eugene; Tan, Chuan Seng

    2016-08-01

    The integration of III–V semiconductors (e.g., GaAs and GaN) and silicon-on-insulator (SOI)-CMOS on a 200 mm Si substrate is demonstrated. The SOI-CMOS donor wafer is temporarily bonded on a Si handle wafer and thinned down. A second GaAs/Ge/Si substrate is then bonded to the SOI-CMOS-containing handle wafer. After that, the Si from the GaAs/Ge/Si substrate is removed. The GaN/Si substrate is then bonded to the SOI–GaAs/Ge-containing handle wafer. Finally, the handle wafer is released to realize the SOI–GaAs/Ge/GaN/Si hybrid structure on a Si substrate. By this method, the functionalities of the materials used can be combined on a single Si platform.

  14. Characterization and comparison of lateral amorphous semiconductors with embedded Frisch grid detectors on 0.18μm CMOS processed substrate for medical imaging applications

    NASA Astrophysics Data System (ADS)

    Hristovski, Christos; Goldan, Amir; Majid, Shaikh Hasibul; Wang, Kai; Shafique, Umar; Karim, Karim

    2011-03-01

    An indirect digital x-ray detector is designed, fabricated, and tested. The detector integrates a high speed, low noise CMOS substrate with two types of amorphous semiconductors on the circuit surface. Using a laterally oriented layout a-Si:H or a-Se can be used to coat the CMOS circuit and provide high speed photoresponse to complement the high speed circuits possible on CMOS technology. The circuit also aims to reduce the effect of slow carriers by integrated a Frisch style grid on the photoconductive layer to screen for the slow carriers. Simulations show a uniform photoresponse for photons absorbed on the top layer and an enhanced response when using a Frisch grid. EQE and noise results are presented. Finally, possible applications and improvements to the area of indirect x-ray imaging that are capable of easily being implemented on the substrate are suggested.

  15. LDRD Final Report - Investigations of the impact of the process integration of deposited magnetic films for magnetic memory technologies on radiation-hardened CMOS devices and circuits - LDRD Project (FY99)

    SciTech Connect

    MYERS,DAVID R.; JESSING,JEFFREY R.; SPAHN,OLGA B.; SHANEYFELT,MARTY R.

    2000-01-01

    This project represented a coordinated LLNL-SNL collaboration to investigate the feasibility of developing radiation-hardened magnetic non-volatile memories using giant magnetoresistance (GMR) materials. The intent of this limited-duration study was to investigate whether giant magnetoresistance (GMR) materials similar to those used for magnetic tunnel junctions (MTJs) were process compatible with functioning CMOS circuits. Sandia's work on this project demonstrated that deposition of GMR materials did not affect the operation nor the radiation hardness of Sandia's rad-hard CMOS technology, nor did the integration of GMR materials and exposure to ionizing radiation affect the magnetic properties of the GMR films. Thus, following deposition of GMR films on rad-hard integrated circuits, both the circuits and the films survived ionizing radiation levels consistent with DOE mission requirements. Furthermore, Sandia developed techniques to pattern deposited GMR films without degrading the completed integrated circuits upon which they were deposited. The present feasibility study demonstrated all the necessary processing elements to allow fabrication of the non-volatile memory elements onto an existing CMOS chip, and even allow the use of embedded (on-chip) non-volatile memories for system-on-a-chip applications, even in demanding radiation environments. However, funding agencies DTRA, AIM, and DARPA did not have any funds available to support the required follow-on technology development projects that would have been required to develop functioning prototype circuits, nor were such funds available from LDRD nor from other DOE program funds.

  16. Lab-on-CMOS Integration of Microfluidics and Electrochemical Sensors

    PubMed Central

    Huang, Yue; Mason, Andrew J.

    2013-01-01

    This paper introduces a CMOS-microfluidics integration scheme for electrochemical microsystems. A CMOS chip was embedded into a micro-machined silicon carrier. By leveling the CMOS chip and carrier surface to within 100 nm, an expanded obstacle-free surface suitable for photolithography was achieved. Thin film metal planar interconnects were microfabricated to bridge CMOS pads to the perimeter of the carrier, leaving a flat and smooth surface for integrating microfluidic structures. A model device containing SU-8 microfluidic mixers and detection channels crossing over microelectrodes on a CMOS integrated circuit was constructed using the chip-carrier assembly scheme. Functional integrity of microfluidic structures and on-CMOS electrodes was verified by a simultaneous sample dilution and electrochemical detection experiment within multi-channel microfluidics. This lab-on-CMOS integration process is capable of high packing density, is suitable for wafer-level batch production, and opens new opportunities to combine the performance benefits of on-CMOS sensors with lab-on-chip platforms. PMID:23939616

  17. Implantable CMOS Biomedical Devices

    PubMed Central

    Ohta, Jun; Tokuda, Takashi; Sasagawa, Kiyotaka; Noda, Toshihiko

    2009-01-01

    The results of recent research on our implantable CMOS biomedical devices are reviewed. Topics include retinal prosthesis devices and deep-brain implantation devices for small animals. Fundamental device structures and characteristics as well as in vivo experiments are presented. PMID:22291554

  18. CMOS floating-point vector-arithmetic unit

    NASA Astrophysics Data System (ADS)

    Timmermann, D.; Rix, B.; Hahn, H.; Hosticka, B. J.

    1994-05-01

    This work describes a floating-point arithmetic unit based on the CORDIC algorithm. The unit computes a full set of high level arithmetic and elementary functions: multiplication, division, (co)sine, hyperbolic (co)sine, square root, natural logarithm, inverse (hyperbolic) tangent, vector norm, and phase. The chip has been integrated in 1.6 micron double-metal n-well CMOS technology and achieves a normalized peak performance of 220 MFLOPS.

  19. A CMOS high speed imaging system design based on FPGA

    NASA Astrophysics Data System (ADS)

    Tang, Hong; Wang, Huawei; Cao, Jianzhong; Qiao, Mingrui

    2015-10-01

    CMOS sensors have more advantages than traditional CCD sensors. The imaging system based on CMOS has become a hot spot in research and development. In order to achieve the real-time data acquisition and high-speed transmission, we design a high-speed CMOS imaging system on account of FPGA. The core control chip of this system is XC6SL75T and we take advantages of CameraLink interface and AM41V4 CMOS image sensors to transmit and acquire image data. AM41V4 is a 4 Megapixel High speed 500 frames per second CMOS image sensor with global shutter and 4/3" optical format. The sensor uses column parallel A/D converters to digitize the images. The CameraLink interface adopts DS90CR287 and it can convert 28 bits of LVCMOS/LVTTL data into four LVDS data stream. The reflected light of objects is photographed by the CMOS detectors. CMOS sensors convert the light to electronic signals and then send them to FPGA. FPGA processes data it received and transmits them to upper computer which has acquisition cards through CameraLink interface configured as full models. Then PC will store, visualize and process images later. The structure and principle of the system are both explained in this paper and this paper introduces the hardware and software design of the system. FPGA introduces the driven clock of CMOS. The data in CMOS is converted to LVDS signals and then transmitted to the data acquisition cards. After simulation, the paper presents a row transfer timing sequence of CMOS. The system realized real-time image acquisition and external controls.

  20. Delta Doping High Purity CCDs and CMOS for LSST

    NASA Technical Reports Server (NTRS)

    Blacksberg, Jordana; Nikzad, Shouleh; Hoenk, Michael; Elliott, S. Tom; Bebek, Chris; Holland, Steve; Kolbe, Bill

    2006-01-01

    A viewgraph presentation describing delta doping high purity CCD's and CMOS for LSST is shown. The topics include: 1) Overview of JPL s versatile back-surface process for CCDs and CMOS; 2) Application to SNAP and ORION missions; 3) Delta doping as a back-surface electrode for fully depleted LBNL CCDs; 4) Delta doping high purity CCDs for SNAP and ORION; 5) JPL CMP thinning process development; and 6) Antireflection coating process development.

  1. A 128 x 128 CMOS Active Pixel Image Sensor for Highly Integrated Imaging Systems

    NASA Technical Reports Server (NTRS)

    Mendis, Sunetra K.; Kemeny, Sabrina E.; Fossum, Eric R.

    1993-01-01

    A new CMOS-based image sensor that is intrinsically compatible with on-chip CMOS circuitry is reported. The new CMOS active pixel image sensor achieves low noise, high sensitivity, X-Y addressability, and has simple timing requirements. The image sensor was fabricated using a 2 micrometer p-well CMOS process, and consists of a 128 x 128 array of 40 micrometer x 40 micrometer pixels. The CMOS image sensor technology enables highly integrated smart image sensors, and makes the design, incorporation and fabrication of such sensors widely accessible to the integrated circuit community.

  2. Ink-Jet Printed CMOS Electronics from Oxide Semiconductors.

    PubMed

    Garlapati, Suresh Kumar; Baby, Tessy Theres; Dehm, Simone; Hammad, Mohammed; Chakravadhanula, Venkata Sai Kiran; Kruk, Robert; Hahn, Horst; Dasgupta, Subho

    2015-08-01

    Complementary metal oxide semiconductor (CMOS) technology with high transconductance and signal gain is mandatory for practicable digital/analog logic electronics. However, high performance all-oxide CMOS logics are scarcely reported in the literature; specifically, not at all for solution-processed/printed transistors. As a major step toward solution-processed all-oxide electronics, here it is shown that using a highly efficient electrolyte-gating approach one can obtain printed and low-voltage operated oxide CMOS logics with high signal gain (≈21 at a supply voltage of only 1.5 V) and low static power dissipation. PMID:25867029

  3. All-CMOS night vision viewer with integrated microdisplay

    NASA Astrophysics Data System (ADS)

    Goosen, Marius E.; Venter, Petrus J.; du Plessis, Monuko; Faure, Nicolaas M.; Janse van Rensburg, Christo; Rademeyer, Pieter

    2014-02-01

    The unrivalled integration potential of CMOS has made it the dominant technology for digital integrated circuits. With the advent of visible light emission from silicon through hot carrier electroluminescence, several applications arose, all of which rely upon the advantages of mature CMOS technologies for a competitive edge in a very active and attractive market. In this paper we present a low-cost night vision viewer which employs only standard CMOS technologies. A commercial CMOS imager is utilized for near infrared image capturing with a 128x96 pixel all-CMOS microdisplay implemented to convey the image to the user. The display is implemented in a standard 0.35 μm CMOS process, with no process alterations or post processing. The display features a 25 μm pixel pitch and a 3.2 mm x 2.4 mm active area, which through magnification presents the virtual image to the user equivalent of a 19-inch display viewed from a distance of 3 meters. This work represents the first application of a CMOS microdisplay in a low-cost consumer product.

  4. Theoretical performance analysis for CMOS based high resolution detectors.

    PubMed

    Jain, Amit; Bednarek, Daniel R; Rudin, Stephen

    2013-03-01

    High resolution imaging capabilities are essential for accurately guiding successful endovascular interventional procedures. Present x-ray imaging detectors are not always adequate due to their inherent limitations. The newly-developed high-resolution micro-angiographic fluoroscope (MAF-CCD) detector has demonstrated excellent clinical image quality; however, further improvement in performance and physical design may be possible using CMOS sensors. We have thus calculated the theoretical performance of two proposed CMOS detectors which may be used as a successor to the MAF. The proposed detectors have a 300 μm thick HL-type CsI phosphor, a 50 μm-pixel CMOS sensor with and without a variable gain light image intensifier (LII), and are designated MAF-CMOS-LII and MAF-CMOS, respectively. For the performance evaluation, linear cascade modeling was used. The detector imaging chains were divided into individual stages characterized by one of the basic processes (quantum gain, binomial selection, stochastic and deterministic blurring, additive noise). Ranges of readout noise and exposure were used to calculate the detectors' MTF and DQE. The MAF-CMOS showed slightly better MTF than the MAF-CMOS-LII, but the MAF-CMOS-LII showed far better DQE, especially for lower exposures. The proposed detectors can have improved MTF and DQE compared with the present high resolution MAF detector. The performance of the MAF-CMOS is excellent for the angiography exposure range; however it is limited at fluoroscopic levels due to additive instrumentation noise. The MAF-CMOS-LII, having the advantage of the variable LII gain, can overcome the noise limitation and hence may perform exceptionally for the full range of required exposures; however, it is more complex and hence more expensive. PMID:24353390

  5. Fully CMOS-compatible titanium nitride nanoantennas

    NASA Astrophysics Data System (ADS)

    Briggs, Justin A.; Naik, Gururaj V.; Petach, Trevor A.; Baum, Brian K.; Goldhaber-Gordon, David; Dionne, Jennifer A.

    2016-02-01

    CMOS-compatible fabrication of plasmonic materials and devices will accelerate the development of integrated nanophotonics for information processing applications. Using low-temperature plasma-enhanced atomic layer deposition (PEALD), we develop a recipe for fully CMOS-compatible titanium nitride (TiN) that is plasmonic in the visible and near infrared. Films are grown on silicon, silicon dioxide, and epitaxially on magnesium oxide substrates. By optimizing the plasma exposure per growth cycle during PEALD, carbon and oxygen contamination are reduced, lowering undesirable loss. We use electron beam lithography to pattern TiN nanopillars with varying diameters on silicon in large-area arrays. In the first reported single-particle measurements on plasmonic TiN, we demonstrate size-tunable darkfield scattering spectroscopy in the visible and near infrared regimes. The optical properties of this CMOS-compatible material, combined with its high melting temperature and mechanical durability, comprise a step towards fully CMOS-integrated nanophotonic information processing.

  6. CCD and CMOS sensors

    NASA Astrophysics Data System (ADS)

    Waltham, Nick

    The charge-coupled device (CCD) has been developed primarily as a compact image sensor for consumer and industrial markets, but is now also the preeminent visible and ultraviolet wavelength image sensor in many fields of scientific research including space-science and both Earth and planetary remote sensing. Today"s scientific or science-grade CCD will strive to maximise pixel count, focal plane coverage, photon detection efficiency over the broadest spectral range and signal dynamic range whilst maintaining the lowest possible readout noise. The relatively recent emergence of complementary metal oxide semiconductor (CMOS) image sensor technology is arguably the most important development in solid-state imaging since the invention of the CCD. CMOS technology enables the integration on a single silicon chip of a large array of photodiode pixels alongside all of the ancillary electronics needed to address the array and digitise the resulting analogue video signal. Compared to the CCD, CMOS promises a more compact, lower mass, lower power and potentially more radiation tolerant camera.

  7. Low-Power SOI CMOS Transceiver

    NASA Technical Reports Server (NTRS)

    Fujikawa, Gene (Technical Monitor); Cheruiyot, K.; Cothern, J.; Huang, D.; Singh, S.; Zencir, E.; Dogan, N.

    2003-01-01

    The work aims at developing a low-power Silicon on Insulator Complementary Metal Oxide Semiconductor (SOI CMOS) Transceiver for deep-space communications. RF Receiver must accomplish the following tasks: (a) Select the desired radio channel and reject other radio signals, (b) Amplify the desired radio signal and translate them back to baseband, and (c) Detect and decode the information with Low BER. In order to minimize cost and achieve high level of integration, receiver architecture should use least number of external filters and passive components. It should also consume least amount of power to minimize battery cost, size, and weight. One of the most stringent requirements for deep-space communication is the low-power operation. Our study identified that two candidate architectures listed in the following meet these requirements: (1) Low-IF receiver, (2) Sub-sampling receiver. The low-IF receiver uses minimum number of external components. Compared to Zero-IF (Direct conversion) architecture, it has less severe offset and flicker noise problems. The Sub-sampling receiver amplifies the RF signal and samples it using track-and-hold Subsampling mixer. These architectures provide low-power solution for the short- range communications missions on Mars. Accomplishments to date include: (1) System-level design and simulation of a Double-Differential PSK receiver, (2) Implementation of Honeywell SOI CMOS process design kit (PDK) in Cadence design tools, (3) Design of test circuits to investigate relationships between layout techniques, geometry, and low-frequency noise in SOI CMOS, (4) Model development and verification of on-chip spiral inductors in SOI CMOS process, (5) Design/implementation of low-power low-noise amplifier (LNA) and mixer for low-IF receiver, and (6) Design/implementation of high-gain LNA for sub-sampling receiver. Our initial results show that substantial improvement in power consumption is achieved using SOI CMOS as compared to standard CMOS

  8. CMOS Compatible 3-Axis Magnetic Field Sensor using Hall Effect Sensing

    NASA Astrophysics Data System (ADS)

    Locke, Joshua R.

    The purpose of this study is to design, fabricate and test a CMOS compatible 3-axis Hall effect sensor capable of detecting the earth's magnetic field, with strength's of ˜50 muT. Preliminary testing of N-well Van Der Pauw structures using strong neodymium magnets showed proof of concept for hall voltage sensing, however, poor geometry of the structures led to a high offset voltage. A 1-axis Hall effect sensor was designed, fabricated and tested with a sensitivity of 1.12x10-3 mV/Gauss using the RIT metal gate PMOS process. Poor geometry and insufficient design produced an offset voltage of 0.1238 volts in the 1-axis design; prevented sensing of the earth's magnetic field. The new design features improved geometry for sensing application, improved sensitivity and use the RIT sub-CMOS process. The completed 2-axis device showed an average sensitivity to large magnetic fields of 0.0258 muV/Gauss at 10 mA supply current.

  9. OLED-on-CMOS integration for optoelectronic sensor applications

    NASA Astrophysics Data System (ADS)

    Vogel, Uwe; Kreye, Daniel; Reckziegel, Sven; Törker, Michael; Grillberger, Christiane; Amelung, Jörg

    2007-02-01

    Highly-efficient, low-voltage organic light emitting diodes (OLEDs) are well suitable for post-processing integration onto the top metal layer of CMOS devices. This has been proven for OLED microdisplays so far. Moreover, OLEDon- CMOS technology may also be excellently suitable for various optoelectronic sensor applications by combining highly efficient emitters, use of low-cost materials and cost-effective manufacturing together with silicon-inherent photodetectors and CMOS circuitry. The use of OLEDs on CMOS substrates requires a top-emitting, low-voltage and highly efficient OLED structure. By reducing the operating voltage for the OLED below 5V, the costs for the CMOS process can be reduced, because a process without high-voltage option can be used. Red, orange, white, green and blue OLED-stacks with doped charge transport layers were prepared on different dualmetal layer CMOS test substrates without active transistor area. Afterwards, the different devices were measured and compared with respect to their performance (current, luminance, voltage, luminance dependence on viewing angle, optical outcoupling etc.). Low operating voltages of 2.4V at 100cd/m2 for the red p-i-n type phosphorescent emitting OLED stack, 2.5V at 100cd/m2 for the orange phosphorescent emitting OLED stack and 3.2V at 100cd/m2 for the white fluorescent emitting OLED have been achieved here. Therefore, those OLED stacks are suitable for use in a CMOS process even within a regular 5V process option. Moreover, the operating voltage achieved so far is expected to be reduced further when using different top electrode materials. Integrating such OLEDs on a CMOS-substrate provide a preferable choice for silicon-based optical microsystems targeted towards optoelectronic sensor applications, as there are integrated light barriers, optocouplers, or lab-onchip devices.

  10. A 16-channel CMOS preamplifier for laser ranging radar receivers

    NASA Astrophysics Data System (ADS)

    Liu, Ru-qing; Zhu, Jing-guo; Jiang, Yan; Li, Meng-lin; Li, Feng

    2015-10-01

    A 16-channal front-end preamplifier array has been design in a 0.18um CMOS process for pulse Laser ranging radar receiver. This front-end preamplifier array incorporates transimpedance amplifiers(TIAs) and differential voltage post-amplifier(PAMP),band gap reference and other interface circuits. In the circuit design, the regulated cascade (RGC) input stage, Cherry-Hooper and active inductor peaking were employed to enhance the bandwidth. And in the layout design, by applying the layout isolation structure combined with P+ guard-ring(PGR), N+ guard-ring(NGR),and deep-n-well(DNW) for amplifier array, the crosstalk and the substrate noise coupling was reduced effectively. The simulations show that a single channel receiver front-end preamplifier achieves 95 dBΩ transimpedance gain and 600MHz bandwidth for 3 PF photodiode capacitance. The total power of 16-channel front-end amplifier array is about 800mW for 1.8V supply.

  11. Biosensing with integrated CMOS nanopores

    NASA Astrophysics Data System (ADS)

    Uddin, Ashfaque; Yemenicioglu, Sukru; Chen, Chin-Hsuan; Corgliano, Ellie; Milaninia, Kaveh; Xia, Fan; Plaxco, Kevin; Theogarajan, Luke

    2012-10-01

    This paper outlines our recent efforts in using solid-state nanopores as a biosensing platform. Traditionally biosensors concentrate mainly on the detection platform and not on signal processing. This decoupling can lead to inferior sensors and is exacerbated in nanoscale devices, where device noise is large and large dynamic range is required. This paper outlines a novel platform that integrates the nano, micro and macroscales in a closely coupled manner that mitigates many of these problems. We discuss our initial results of DNA translocation through the nanopore. We also briefly discuss the use of molecular recognition properties of aptamers with the versatility of the nanopore detector to design a new class of biosensors in a CMOS compatible platform.

  12. Spectrum acquisition of detonation based on CMOS

    NASA Astrophysics Data System (ADS)

    Li, Yan; Bai, Yonglin; Wang, Bo; Liu, Baiyu; Xue, Yingdong; Zhang, Wei; Gou, Yongsheng; Bai, Xiaohong; Qin, Junjun; Xian, Ouyang

    2010-10-01

    The detection of high-speed dynamic spectrum is the main method to acquire transient information. In order to obtain the large amount spectral data in real-time during the process of detonation, a CMOS-based system with high-speed spectrum data acquisition is designed. The hardware platform of the system is based on FPGA, and the unique characteristic of CMOS image sensors in the rolling shutter model is used simultaneously. Using FPGA as the master control chip of the system, not only provides the time sequence for CIS, but also controls the storage and transmission of the spectral data. In the experiment of spectral data acquisition, the acquired information is transmitted to the host computer through the CameraLink bus. The dynamic spectral curve is obtained after the subsequent processing. The experimental results demonstrate that this system is feasible in the acquisition and storage of high-speed dynamic spectrum information during the process of detonation.

  13. Advancement of CMOS Doping Technology in an External Development Framework

    NASA Astrophysics Data System (ADS)

    Jain, Amitabh; Chambers, James J.; Shaw, Judy B.

    2011-01-01

    The consumer appetite for a rich multimedia experience drives technology development for mobile hand-held devices and the infrastructure to support them. Enhancements in functionality, speed, and user experience are derived from advancements in CMOS technology. The technical challenges in developing each successive CMOS technology node to support these enhancements have become increasingly difficult. These trends have motivated the CMOS business towards a collaborative approach based on strategic partnerships. This paper describes our model and experience of CMOS development, based on multi-dimensional industrial and academic partnerships. We provide to our process equipment, materials, and simulation partners, as well as to our silicon foundry partners, the detailed requirements for future integrated circuit products. This is done very early in the development cycle to ensure that these requirements can be met. In order to determine these fundamental requirements, we rely on a strategy that requires strong interaction between process and device simulation, physical and chemical analytical methods, and research at academic institutions. This learning is shared with each project partner to address integration and manufacturing issues encountered during CMOS technology development from its inception through product ramp. We utilize TI's core strengths in physical analysis, unit processes and integration, yield ramp, reliability, and product engineering to support this technological development. Finally, this paper presents examples of the advancement of CMOS doping technology for the 28 nm node and beyond through this development model.

  14. Interferometric comparison of the performance of a CMOS and sCMOS detector

    NASA Astrophysics Data System (ADS)

    Flores-Moreno, J. M.; De la Torre I., Manuel H.; Hernández-Montes, M. S.; Pérez-López, Carlos; Mendoza S., Fernando

    2015-08-01

    We present an analysis of the imaging performance of two state-of-the-art sensors widely used in the nondestructive- testing area (NDT). The analysis is based on the quantification of the signal-to-noise (SNR) ratio from an optical phase image. The calculation of the SNR is based on the relation of the median (average) and standard deviation measurements over specific areas of interest in the phase images of both sensors. This retrieved phase is coming from the vibrational behavior of a large object by means of an out-of-plane holographic interferometer. The SNR is used as a figure-of-merit to evaluate and compare the performance of the CMOS and scientific CMOS (sCMOS) camera as part of the experimental set-up. One of the cameras has a high speed CMOS sensor while the other has a high resolution sCMOS sensor. The object under study is a metallically framed table with a Formica cover with an observable area of 1.1 m2. The vibration induced to the sample is performed by a linear step motor with an attached tip in the motion stage. Each camera is used once at the time to record the deformation keeping the same experimental conditions for each case. These measurements may complement the conventional procedures or technical information commonly used to evaluate a camerás performance such as: quantum efficiency, spatial resolution and others. Results present post processed images from both cameras, but showing a smoother and easy to unwrap optical phase coming from those recorded with the sCMOS camera.

  15. IR CMOS: infrared enhanced silicon imaging

    NASA Astrophysics Data System (ADS)

    Pralle, M. U.; Carey, J. E.; Haddad, Homayoon; Vineis, C.; Sickler, J.; Li, X.; Jiang, J.; Sahebi, F.; Palsule, C.; McKee, J.

    2013-06-01

    SiOnyx has developed visible and infrared CMOS image sensors leveraging a proprietary ultrafast laser semiconductor process technology. This technology demonstrates 10 fold improvements in infrared sensitivity over incumbent imaging technology while maintaining complete compatibility with standard CMOS image sensor process flows. Furthermore, these sensitivity enhancements are achieved on a focal plane with state of the art noise performance of 2 electrons/pixel. By capturing light in the visible regime as well as infrared light from the night glow, this sensor technology provides imaging in daytime through twilight and into nighttime conditions. The measured 10x quantum efficiency at the critical 1064 nm laser node enables see spot imaging capabilities in a variety of ambient conditions. The spectral sensitivity is from 400 to 1200 nm.

  16. Depleted CMOS pixels for LHC proton-proton experiments

    NASA Astrophysics Data System (ADS)

    Wermes, N.

    2016-07-01

    While so far monolithic pixel detectors have remained in the realm of comparatively low rate and radiation applications outside LHC, new developments exploiting high resistivity substrates with three or four well CMOS process options allow reasonably large depletion depths and full CMOS circuitry in a monolithic structure. This opens up the possibility to target CMOS pixel detectors also for high radiation pp-experiments at the LHC upgrade, either in a hybrid-type fashion or even fully monolithic. Several pixel matrices have been prototyped with high ohmic substrates, high voltage options, and full CMOS electronics. They were characterized in the lab and in test beams. An overview of the necessary development steps and different approaches as well as prototype results are presented in this paper.

  17. A safety monitoring system for taxi based on CMOS imager

    NASA Astrophysics Data System (ADS)

    Liu, Zhi

    2005-01-01

    CMOS image sensors now become increasingly competitive with respect to their CCD counterparts, while adding advantages such as no blooming, simpler driving requirements and the potential of on-chip integration of sensor, analogue circuitry, and digital processing functions. A safety monitoring system for taxi based on cmos imager that can record field situation when unusual circumstance happened is described in this paper. The monitoring system is based on a CMOS imager (OV7120), which can output digital image data through parallel pixel data port. The system consists of a CMOS image sensor, a large capacity NAND FLASH ROM, a USB interface chip and a micro controller (AT90S8515). The structure of whole system and the test data is discussed and analyzed in detail.

  18. Regenerative switching CMOS system

    DOEpatents

    Welch, J.D.

    1998-06-02

    Complementary Metal Oxide Semiconductor (CMOS) Schottky barrier Field Effect Transistor systems, which are a series combination of N and P-Channel MOSFETS, in which Source Schottky barrier junctions of the N and P-Channel Schottky barrier MOSFETS are electrically interconnected, (rather than the Drains as in conventional diffused junction CMOS), which Schottky barrier MOSFET system demonstrates Regenerative Inverting Switching Characteristics in use are disclosed. Both the N and P-Channel Schottky barrier MOSFET devices are unique in that they provide operational Drain Current vs. Drain to Source voltage as a function of Gate voltage only where the polarities of the Drain voltage and Gate voltage are opposite, referenced to the Source as a common terminal, and where the polarity of the voltage applied to the Gate is appropriate to cause Channel inversion. Experimentally derived results which demonstrate and verify the operation of N and P-Channel Schottky barrier MOSFETS actually fabricated on P and N-type Silicon respectively, by a common procedure using vacuum deposited Chromium as a Schottky barrier forming metal, are also provided. 14 figs.

  19. Regenerative switching CMOS system

    DOEpatents

    Welch, James D.

    1998-01-01

    Complementary Metal Oxide Semiconductor (CMOS) Schottky barrier Field Effect Transistor systems, which are a seriesed combination of N and P-Channel MOSFETS, in which Source Schottky barrier junctions of the N and P-Channel Schottky barrier MOSFETS are electically interconnected, (rather than the Drains as in conventional diffused junction CMOS), which Schottky barrier MOSFET system demonstrates Regenerative Inverting Switching Characteristics in use are disclosed. Both the N and P-Channel Schottky barrier MOSFET devices are unique in that they provide operational Drain Current vs. Drain to Source voltage as a function of Gate voltage only where the polarities of the Drain voltage and Gate voltage are opposite, referenced to the Source as a common terminal, and where the polarity of the voltage applied to the Gate is appropriate to cause Channel inversion. Experimentally derived results which demonstrate and verify the operation of N and P-Channel Schottky barrier MOSFETS actually fabricated on P and N-type Silicon respectively, by a common procedure using vacuum deposited Chromium as a Schottky barrier forming metal, are also provided.

  20. Advanced CMOS Radiation Effects Testing Analysis

    NASA Technical Reports Server (NTRS)

    Pellish, Jonathan Allen; Marshall, Paul W.; Rodbell, Kenneth P.; Gordon, Michael S.; LaBel, Kenneth A.; Schwank, James R.; Dodds, Nathaniel A.; Castaneda, Carlos M.; Berg, Melanie D.; Kim, Hak S.; Phan, Anthony M.; Seidleck, Christina M.

    2014-01-01

    Presentation at the annual NASA Electronic Parts and Packaging (NEPP) Program Electronic Technology Workshop (ETW). The material includes an update of progress in this NEPP task area over the past year, which includes testing, evaluation, and analysis of radiation effects data on the IBM 32 nm silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) process. The testing was conducted using test vehicles supplied by directly by IBM.

  1. Advanced CMOS Radiation Effects Testing and Analysis

    NASA Technical Reports Server (NTRS)

    Pellish, J. A.; Marshall, P. W.; Rodbell, K. P.; Gordon, M. S.; LaBel, K. A.; Schwank, J. R.; Dodds, N. A.; Castaneda, C. M.; Berg, M. D.; Kim, H. S.; Phan, A. M.; Seidleck, C. M.

    2014-01-01

    Presentation at the annual NASA Electronic Parts and Packaging (NEPP) Program Electronic Technology Workshop (ETW). The material includes an update of progress in this NEPP task area over the past year, which includes testing, evaluation, and analysis of radiation effects data on the IBM 32 nm silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) process. The testing was conducted using test vehicles supplied by directly by IBM.

  2. Ultralow-Loss CMOS Copper Plasmonic Waveguides.

    PubMed

    Fedyanin, Dmitry Yu; Yakubovsky, Dmitry I; Kirtaev, Roman V; Volkov, Valentyn S

    2016-01-13

    Surface plasmon polaritons can give a unique opportunity to manipulate light at a scale well below the diffraction limit reducing the size of optical components down to that of nanoelectronic circuits. At the same time, plasmonics is mostly based on noble metals, which are not compatible with microelectronics manufacturing technologies. This prevents plasmonic components from integration with both silicon photonics and silicon microelectronics. Here, we demonstrate ultralow-loss copper plasmonic waveguides fabricated in a simple complementary metal-oxide semiconductor (CMOS) compatible process, which can outperform gold plasmonic waveguides simultaneously providing long (>40 μm) propagation length and deep subwavelength (∼λ(2)/50, where λ is the free-space wavelength) mode confinement in the telecommunication spectral range. These results create the backbone for the development of a CMOS plasmonic platform and its integration in future electronic chips. PMID:26654281

  3. Quantitative optical metrology with CMOS cameras

    NASA Astrophysics Data System (ADS)

    Furlong, Cosme; Kolenovic, Ervin; Ferguson, Curtis F.

    2004-08-01

    Recent advances in laser technology, optical sensing, and computer processing of data, have lead to the development of advanced quantitative optical metrology techniques for high accuracy measurements of absolute shapes and deformations of objects. These techniques provide noninvasive, remote, and full field of view information about the objects of interest. The information obtained relates to changes in shape and/or size of the objects, characterizes anomalies, and provides tools to enhance fabrication processes. Factors that influence selection and applicability of an optical technique include the required sensitivity, accuracy, and precision that are necessary for a particular application. In this paper, sensitivity, accuracy, and precision characteristics in quantitative optical metrology techniques, and specifically in optoelectronic holography (OEH) based on CMOS cameras, are discussed. Sensitivity, accuracy, and precision are investigated with the aid of National Institute of Standards and Technology (NIST) traceable gauges, demonstrating the applicability of CMOS cameras in quantitative optical metrology techniques. It is shown that the advanced nature of CMOS technology can be applied to challenging engineering applications, including the study of rapidly evolving phenomena occurring in MEMS and micromechatronics.

  4. A Pixel Readout Chip in 40 nm CMOS Process for High Count Rate Imaging Systems with Minimization of Charge Sharing Effects

    SciTech Connect

    Maj, Piotr; Grybos, P.; Szczgiel, R.; Kmon, P.; Drozd, A.; Deptuch, G.

    2013-11-07

    We present a prototype chip in 40 nm CMOS technology for readout of hybrid pixel detector. The prototype chip has a matrix of 18x24 pixels with a pixel pitch of 100 m. It can operate both in single photon counting (SPC) mode and in C8P1 mode. In SPC the measured ENC is 84 e rms (for the peaking time of 48 ns), while the effective offset spread is below 2 mV rms. In the C8P1 mode the chip reconstructs full charge deposited in the detector, even in the case of charge sharing, and it identifies a pixel with the largest charge deposition. The chip architecture and preliminary measurements are reported.

  5. A CMOS readout system for very large detector capacitances

    NASA Astrophysics Data System (ADS)

    Schoeneberg, U.; Hosticka, B. J.; Fent, J.; Oberlack, H.; Zimmer, G.

    1990-03-01

    In this contribution we present readout electronics for a liquid-argon calorimeter. It has been designed and optimized for operation at cryogenic temperatures and it is integrated in an n-well 2 μm CMOS technology. The chip contains 16 analog channels with switched-capacitor circuits for charge collection, storage, and amplification, and averaging and correlated double sampling circuits for noise reduction. Further components include a trigger generator, an analog multiplexer, digital control circuits for analog switching, and 50 ω cable drivers.

  6. Design and Fabrication of Vertically-Integrated CMOS Image Sensors

    PubMed Central

    Skorka, Orit; Joseph, Dileepan

    2011-01-01

    Technologies to fabricate integrated circuits (IC) with 3D structures are an emerging trend in IC design. They are based on vertical stacking of active components to form heterogeneous microsystems. Electronic image sensors will benefit from these technologies because they allow increased pixel-level data processing and device optimization. This paper covers general principles in the design of vertically-integrated (VI) CMOS image sensors that are fabricated by flip-chip bonding. These sensors are composed of a CMOS die and a photodetector die. As a specific example, the paper presents a VI-CMOS image sensor that was designed at the University of Alberta, and fabricated with the help of CMC Microsystems and Micralyne Inc. To realize prototypes, CMOS dies with logarithmic active pixels were prepared in a commercial process, and photodetector dies with metal-semiconductor-metal devices were prepared in a custom process using hydrogenated amorphous silicon. The paper also describes a digital camera that was developed to test the prototype. In this camera, scenes captured by the image sensor are read using an FPGA board, and sent in real time to a PC over USB for data processing and display. Experimental results show that the VI-CMOS prototype has a higher dynamic range and a lower dark limit than conventional electronic image sensors. PMID:22163860

  7. On noise in time-delay integration CMOS image sensors

    NASA Astrophysics Data System (ADS)

    Levski, Deyan; Choubey, Bhaskar

    2016-05-01

    Time delay integration sensors are of increasing interest in CMOS processes owing to their low cost, power and ability to integrate with other circuit readout blocks. This paper presents an analysis of the noise contributors in current day CMOS Time-Delay-Integration image sensors with various readout architectures. An analysis of charge versus voltage domain readout modes is presented, followed by a noise classification of the existing Analog Accumulator Readout (AAR) and Digital Accumulator Readout (DAR) schemes for TDI imaging. The analysis and classification of existing readout schemes include, pipelined charge transfer, buffered direct injection, voltage as well as current-mode analog accumulators and all-digital accumulator techniques. Time-Delay-Integration imaging modes in CMOS processes typically use an N-number of readout steps, equivalent to the number of TDI pixel stages. In CMOS TDI sensors, where voltage domain readout is used, the requirements over speed and noise of the ADC readout chain are increased due to accumulation of the dominant voltage readout and ADC noise with every stage N. Until this day, the latter is the primary reason for a leap-back of CMOS TDI sensors as compared to their CCD counterparts. Moreover, most commercial CMOS TDI implementations are still based on a charge-domain readout, mimicking a CCD-like operation mode. Thus, having a good understanding of each noise contributor in the signal chain, as well as its magnitude in different readout architectures, is vital for the design of future generation low-noise CMOS TDI image sensors based on a voltage domain readout. This paper gives a quantitative classification of all major noise sources for all popular implementations in the literature.

  8. Current-mode CMOS hybrid image sensor

    NASA Astrophysics Data System (ADS)

    Benyhesan, Mohammad Kassim

    Digital imaging is growing rapidly making Complimentary Metal-Oxide-Semi conductor (CMOS) image sensor-based cameras indispensable in many modern life devices like cell phones, surveillance devices, personal computers, and tablets. For various purposes wireless portable image systems are widely deployed in many indoor and outdoor places such as hospitals, urban areas, streets, highways, forests, mountains, and towers. However, the increased demand on high-resolution image sensors and improved processing features is expected to increase the power consumption of the CMOS sensor-based camera systems. Increased power consumption translates into a reduced battery life-time. The increased power consumption might not be a problem if there is access to a nearby charging station. On the other hand, the problem arises if the image sensor is located in widely spread areas, unfavorable to human intervention, and difficult to reach. Given the limitation of energy sources available for wireless CMOS image sensor, an energy harvesting technique presents a viable solution to extend the sensor life-time. Energy can be harvested from the sun light or the artificial light surrounding the sensor itself. In this thesis, we propose a current-mode CMOS hybrid image sensor capable of energy harvesting and image capture. The proposed sensor is based on a hybrid pixel that can be programmed to perform the task of an image sensor and the task of a solar cell to harvest energy. The basic idea is to design a pixel that can be configured to exploit its internal photodiode to perform two functions: image sensing and energy harvesting. As a proof of concept a 40 x 40 array of hybrid pixels has been designed and fabricated in a standard 0.5 microm CMOS process. Measurement results show that up to 39 microW of power can be harvested from the array under 130 Klux condition with an energy efficiency of 220 nJ /pixel /frame. The proposed image sensor is a current-mode image sensor which has several

  9. A CMOS Humidity Sensor for Passive RFID Sensing Applications

    PubMed Central

    Deng, Fangming; He, Yigang; Zhang, Chaolong; Feng, Wei

    2014-01-01

    This paper presents a low-cost low-power CMOS humidity sensor for passive RFID sensing applications. The humidity sensing element is implemented in standard CMOS technology without any further post-processing, which results in low fabrication costs. The interface of this humidity sensor employs a PLL-based architecture transferring sensor signal processing from the voltage domain to the frequency domain. Therefore this architecture allows the use of a fully digital circuit, which can operate on ultra-low supply voltage and thus achieves low-power consumption. The proposed humidity sensor has been fabricated in the TSMC 0.18 μm CMOS process. The measurements show this humidity sensor exhibits excellent linearity and stability within the relative humidity range. The sensor interface circuit consumes only 1.05 μW at 0.5 V supply voltage and reduces it at least by an order of magnitude compared to previous designs. PMID:24841250

  10. A CMOS humidity sensor for passive RFID sensing applications.

    PubMed

    Deng, Fangming; He, Yigang; Zhang, Chaolong; Feng, Wei

    2014-01-01

    This paper presents a low-cost low-power CMOS humidity sensor for passive RFID sensing applications. The humidity sensing element is implemented in standard CMOS technology without any further post-processing, which results in low fabrication costs. The interface of this humidity sensor employs a PLL-based architecture transferring sensor signal processing from the voltage domain to the frequency domain. Therefore this architecture allows the use of a fully digital circuit, which can operate on ultra-low supply voltage and thus achieves low-power consumption. The proposed humidity sensor has been fabricated in the TSMC 0.18 μm CMOS process. The measurements show this humidity sensor exhibits excellent linearity and stability within the relative humidity range. The sensor interface circuit consumes only 1.05 µW at 0.5 V supply voltage and reduces it at least by an order of magnitude compared to previous designs. PMID:24841250

  11. Large-area low-temperature ultrananocrystaline diamond (UNCD) films and integration with CMOS devices for monolithically integrated diamond MEMD/NEMS-CMOS systems.

    SciTech Connect

    Sumant, A.V.; Auciello, O.; Yuan, H.-C; Ma, Z.; Carpick, R. W.; Mancini, D. C.; Univ. of Wisconsin; Univ. of Pennsylvania

    2009-05-01

    Because of exceptional mechanical, chemical, and tribological properties, diamond has a great potential to be used as a material for the development of high-performance MEMS and NEMS such as resonators and switches compatible with harsh environments, which involve mechanical motion and intermittent contact. Integration of such MEMS/NEMS devices with complementary metal oxide semiconductor (CMOS) microelectronics will provide a unique platform for CMOS-driven commercial MEMS/NEMS. The main hurdle to achieve diamond-CMOS integration is the relatively high substrate temperatures (600-800 C) required for depositing conventional diamond thin films, which are well above the CMOS operating thermal budget (400 C). Additionally, a materials integration strategy has to be developed to enable diamond-CMOS integration. Ultrananocrystalline diamond (UNCD), a novel material developed in thin film form at Argonne, is currently the only microwave plasma chemical vapor deposition (MPCVD) grown diamond film that can be grown at 400 C, and still retain exceptional mechanical, chemical, and tribological properties comparable to that of single crystal diamond. We have developed a process based on MPCVD to synthesize UNCD films on up to 200 mm in diameter CMOS wafers, which will open new avenues for the fabrication of monolithically integrated CMOS-driven MEMS/NEMS based on UNCD. UNCD films were grown successfully on individual Si-based CMOS chips and on 200 mm CMOS wafers at 400 C in a MPCVD system, using Ar-rich/CH4 gas mixture. The CMOS devices on the wafers were characterized before and after UNCD deposition. All devices were performing to specifications with very small degradation after UNCD deposition and processing. A threshold voltage degradation in the range of 0.08-0.44V and transconductance degradation in the range of 1.5-9% were observed.

  12. Improved Space Object Observation Techniques Using CMOS Detectors

    NASA Astrophysics Data System (ADS)

    Schildknecht, T.; Hinze, A.; Schlatter, P.; Silha, J.; Peltonen, J.; Santti, T.; Flohrer, T.

    2013-08-01

    CMOS-sensors, or in general Active Pixel Sensors (APS), are rapidly replacing CCDs in the consumer camera market. Due to significant technological advances during the past years these devices start to compete with CCDs also for demanding scientific imaging applications, in particular in the astronomy community. CMOS detectors offer a series of inherent advantages compared to CCDs, due to the structure of their basic pixel cells, which each contain their own amplifier and readout electronics. The most prominent advantages for space object observations are the extremely fast and flexible readout capabilities, feasibility for electronic shuttering and precise epoch registration, and the potential to perform image processing operations on-chip and in real-time. Presently applied and proposed optical observation strategies for space debris surveys and space surveillance applications had to be analyzed. The major design drivers were identified and potential benefits from using available and future CMOS sensors were assessed. The major challenges and design drivers for ground-based and space-based optical observation strategies have been analyzed. CMOS detector characteristics were critically evaluated and compared with the established CCD technology, especially with respect to the above mentioned observations. Similarly, the desirable on-chip processing functionalities which would further enhance the object detection and image segmentation were identified. Finally, the characteristics of a particular CMOS sensor available at the Zimmerwald observatory were analyzed by performing laboratory test measurements.

  13. Large area CMOS image sensors

    NASA Astrophysics Data System (ADS)

    Turchetta, R.; Guerrini, N.; Sedgwick, I.

    2011-01-01

    CMOS image sensors, also known as CMOS Active Pixel Sensors (APS) or Monolithic Active Pixel Sensors (MAPS), are today the dominant imaging devices. They are omnipresent in our daily life, as image sensors in cellular phones, web cams, digital cameras, ... In these applications, the pixels can be very small, in the micron range, and the sensors themselves tend to be limited in size. However, many scientific applications, like particle or X-ray detection, require large format, often with large pixels, as well as other specific performance, like low noise, radiation hardness or very fast readout. The sensors are also required to be sensitive to a broad spectrum of radiation: photons from the silicon cut-off in the IR down to UV and X- and gamma-rays through the visible spectrum as well as charged particles. This requirement calls for modifications to the substrate to be introduced to provide optimized sensitivity. This paper will review existing CMOS image sensors, whose size can be as large as a single CMOS wafer, and analyse the technical requirements and specific challenges of large format CMOS image sensors.

  14. A 1 V 186-μW 50-MS/s 10-bit subrange SAR ADC in 130-nm CMOS process

    NASA Astrophysics Data System (ADS)

    Mingyuan, Yu; Ting, Li; Jiaqi, Yang; Shuangshuang, Zhang; Fujiang, Lin; Lin, He

    2016-07-01

    This paper presents a 10-bit 50-MS/s subrange successive-approximation register (SAR) analog-to-digital converter (ADC) composed of a 4-bit SAR coarse ADC and a 6-bit SAR fine ADC. In the coarse ADC, multi-comparator SAR architecture is used to reduce the digital logic propagation delay, and a traditional asynchronous SAR ADC with monotonic switching method is used as the fine ADC. With that combination, power dissipation also can be much reduced. Meanwhile, a modified SAR control logic is adopted in the fine ADC to speed up the conversion and other techniques, such as splitting capacitors array, are borrowed to reduce the power consumption. Fabricated with 1P8M 130-nm CMOS technology, the proposed SAR ADC achieves 51.6-dB signal to noise and distortion ratio (SNDR) and consumes 186 μW at 50 MS/s with a 1-V supply, resulting in a figure of merit (FOM) of 12 fJ/conversion-step. The core area is only 0.045 mm2. Project supported by the National Natural Science Foundation of China (Nos. 61204033, 61331015), the Fundamental Research Funds for the Central Universities (No. WK2100230015), and the Funds of Science and Technology on Analog Integrated Circuit Laboratory (No. 9140C090111150C09041).

  15. Development of on-CMOS chip micro-photonic and MOEMS systems

    NASA Astrophysics Data System (ADS)

    Snyman, Lukas W.; Okhai, Timothy; Bourouina, Tarik; Noell, Wilfried

    2011-03-01

    Advanced 3D CAD and optical simulation software were used to design first iteration on-CMOS chip MOEMS micro-systems. A Si Avalanche-based LED and an array of detectors interface laterally with a single arm canti-lever system, all to be fabricated with CMOS technology. Silicon nitride wave-guides are used as optical propagation channels offering losses of lower than 1dB.cm-1. Micro-bending and multi-planing of the wave guiding is possible. Far-field manipulation of the emitted channel radiation is possible. Mechanically designed and sensor systems can be added by means of CMOS post processing techniques. The emission level of the Si CMOS Av LEDs is 10+3 higher than the detectivity of silicon p-i-n detectors, offering good dynamic range in detection and data analyses. The mature processing characteristics of CMOS technology offers high integration possibilities and low cost manufacturing of the designed systems.

  16. High-performance monolithic CMOS detectors for space applications

    NASA Astrophysics Data System (ADS)

    Saint-Pe, Olivier; Tulet, Michel; Davancens, Robert; Larnaudie, Franck; Vignon, Bruno; Magnan, Pierre; Farre, Jean A.; Corbiere, Franck; Martin-Gonthier, Philippe

    2001-12-01

    During the last 10 years, research about CMOS image sensors (also called APS - Active Pixel Sensors) has been intensively carried out, in order to offer an alternative to CCDs as image sensors. This is particularly the case for space applications as CMOS image sensors feature characteristics which are obviously of interest for flight hardware: parallel or semi-parallel architecture, on chip control and processing electronics, low power dissipation, high level of radiation tolerance... Many image sensor companies, institutes and laboratories have demonstrated the compatibility of CMOS image sensors with consumer applications: micro-cameras, video-conferencing, digital- still cameras. And recent designs have shown that APS is getting closer to the CCD in terms of performance level. However, he large majority of the existing products do not offer the specific features which are required for many space applications. ASTRIUM and SUPAERO/CIMI have decided to work together in view of developing CMOS image sensors dedicated to space business. After a brief presentation of the team organization for space image sensor design and production, the latest results of a high performances 512 X 512 pixels CMOS device characterization are presented with emphasis on the achieved electro-optical performance. Finally, the on going and short-term coming activities of the team are discussed.

  17. Challenges of nickel silicidation in CMOS technologies

    SciTech Connect

    Breil, Nicolas; Lavoie, Christian; Ozcan, Ahmet; Baumann, Frieder; Klymko, Nancy; Nummy, Karen; Sun, Bing; Jordan-Sweet, Jean; Yu, Jian; Zhu, Frank; Narasimha, Shreesh; Chudzik, Michael

    2015-04-01

    In our paper, we review some of the key challenges associated with the Ni silicidation process in the most recent CMOS technologies. The introduction of new materials (e.g.SiGe), and of non-planar architectures bring some important changes that require fundamental investigation from a material engineering perspective. Following a discussion of the device architecture and silicide evolution through the last CMOS generations, we focus our study on a very peculiar defect, termed NiSi-Fangs. We describe a mechanism for the defect formation, and present a detailed material analysis that supports this mechanism. We highlight some of the possible metal enrichment processes of the nickel monosilicide such as oxidation or various RIE (Reactive Ion Etching) plasma process, leading to a metal source available for defect formation. Furthermore, we investigate the NiSi formation and re-formation silicidation differences between Si and SiGe materials, and between (1 0 0) and (1 1 1) orientations. Finally, we show that the thermal budgets post silicidation can lead to the formation of NiSi-Fangs if the structure and the processes are not optimized. Beyond the understanding of the defect and the discussion on the engineering solutions used to prevent its formation, the interest of this investigation also lies in the fundamental learning within the Ni–Pt–Si–Ge system and some additional perspective on Ni-based contacts to advanced microelectronic devices.

  18. Impact of technology trends on SEU in CMOS SRAMs

    SciTech Connect

    Dodd, P.E.; Sexton, F.W.; Hash, G.L.; Shaneyfelt, M.R.; Draper, B.L.; Farino, A.J.; Flores, R.S.

    1996-12-01

    The impact of technology trends on the SEU hardness of epitaxial CMOS SRAMs is investigated using three-dimensional simulation. The authors study trends in SEU susceptibility with parameter variations across and within technology generations. Upset mechanisms for various strike locations and their dependence on gate-length scaling are explored. Such studies are useful for technology development and providing input for process and design decisions. An application of SEU simulation to the development of a 0.5-{micro}m radiation-hardened CMOS SRAM is presented.

  19. Optimum Design of CMOS DC-DC Converter for Mobile Applications

    NASA Astrophysics Data System (ADS)

    Katayama, Yasushi; Edo, Masaharu; Denta, Toshio; Kawashima, Tetsuya; Ninomiya, Tamotsu

    In recent years, low output power CMOS DC-DC converters which integrate power stage MOSFETs and a PWM controller using CMOS process have been used in many mobile applications. In this paper, we propose the calculation method of CMOS DC-DC converter efficiency and report optimum design of CMOS DC-DC converter based on this method. By this method, converter efficiencies are directly calculated from converter specifications, dimensions of power stage MOSFET and device parameters. Therefore, this method can be used for optimization of CMOS DC-DC converter design, such as dimensions of power stage MOSFET and switching frequency. The efficiency calculated by the proposed method agrees well with the experimental results.

  20. CMOS digital intra-oral sensor for x-ray radiography

    NASA Astrophysics Data System (ADS)

    Liu, Xinqiao; Byczko, Andrew; Choi, Marcus; Chung, Lap; Do, Hung; Fowler, Boyd; Ispasoiu, Radu; Joshi, Kumar; Miller, Todd; Nagy, Alex; Reaves, David; Rodricks, Brian; Teeter, Doug; Wang, George; Xiao, Feng

    2011-03-01

    In this paper, we present a CMOS digital intra-oral sensor for x-ray radiography. The sensor system consists of a custom CMOS imager, custom scintillator/fiber optics plate, camera timing and digital control electronics, and direct USB communication. The CMOS imager contains 1700 x 1346 pixels. The pixel size is 19.5um x 19.5um. The imager was fabricated with a 0.18um CMOS imaging process. The sensor and CMOS imager design features chamfered corners for patient comfort. All camera functions were integrated within the sensor housing and a standard USB cable was used to directly connect the intra-oral sensor to the host computer. The sensor demonstrated wide dynamic range from 5uGy to 1300uGy and high image quality with a SNR of greater than 160 at 400uGy dose. The sensor has a spatial resolution more than 20 lp/mm.

  1. Integration of GMR-based spin torque oscillators and CMOS circuitry

    NASA Astrophysics Data System (ADS)

    Chen, Tingsu; Eklund, Anders; Sani, Sohrab; Rodriguez, Saul; Malm, B. Gunnar; Åkerman, Johan; Rusu, Ana

    2015-09-01

    This paper demonstrates the integration of giant magnetoresistance (GMR) spin torque oscillators (STO) with dedicated high frequency CMOS circuits. The wire-bonding-based integration approach is employed in this work, since it allows easy implementation, measurement and replacement. A GMR STO is wire-bonded to the dedicated CMOS integrated circuit (IC) mounted on a PCB, forming a (GMR STO + CMOS IC) pair. The GMR STO has a lateral size of 70 nm and more than an octave of tunability in the microwave frequency range. The proposed CMOS IC provides the necessary bias-tee for the GMR STO, as well as electrostatic discharge (ESD) protection and wideband amplification targeting high frequency GMR STO-based applications. It is implemented in a 65 nm CMOS process, offers a measured gain of 12 dB, while consuming only 14.3 mW and taking a total silicon area of 0.329 mm2. The measurement results show that the (GMR STO + CMOS IC) pair has a wide tunability range from 8 GHz to 16.5 GHz and improves the output power of the GMR STO by about 10 dB. This GMR STO-CMOS integration eliminates wave reflections during the signal transmission and therefore exhibits good potential for developing high frequency GMR STO-based applications, which combine the features of CMOS and STO technologies.

  2. An SEU-hardened CMOS data latch design

    SciTech Connect

    Rockett, L.R. Jr.

    1988-12-01

    A Single Event Upset (SEU)-hardened Complementary Metal-Oxide Semiconductor (CMOS) data latch design is described. The hardness is achieved by virtue of the latch design, thus no fabrication process or design groundrule development is required. Hardness is gained with comparatively little adverse impact on performance. Cyclotron tests provided hardness verification.

  3. Overcoming scaling concerns in a radiation-hardening CMOS technology

    SciTech Connect

    Maimon, J.; Haddad, N.

    1999-12-01

    Scaling efforts to develop an advanced radiation-hardened CMOS process to support a 4M SRAM are described. Issues encountered during scaling of transistor, isolation, and resistor elements are discussed, as well as the solutions used to overcome these issues. Transistor data, total dose radiation results, and the performance of novel resistors for prevention of single event upsets (SEU) are presented.

  4. Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators

    PubMed Central

    Kao, Pin-Hsu; Shih, Po-Jen; Dai, Ching-Liang; Liu, Mao-Chen

    2010-01-01

    This work presents a thermoelectric micro generator fabricated by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and the post-CMOS process. The micro generator is composed of 24 thermocouples in series. Each thermocouple is constructed by p-type and n-type polysilicon strips. The output power of the generator depends on the temperature difference between the hot and cold parts in the thermocouples. In order to prevent heat-receiving in the cold part in the thermocouples, the cold part is covered with a silicon dioxide layer with low thermal conductivity to insulate the heat source. The hot part of the thermocouples is suspended and connected to an aluminum plate, to increases the heat-receiving area in the hot part. The generator requires a post-CMOS process to release the suspended structures. The post-CMOS process uses an anisotropic dry etching to remove the oxide sacrificial layer and an isotropic dry etching to etch the silicon substrate. Experimental results show that the micro generator has an output voltage of 67 μV at the temperature difference of 1 K. PMID:22205869

  5. Thin Film on CMOS Active Pixel Sensor for Space Applications

    PubMed Central

    Schulze Spuentrup, Jan Dirk; Burghartz, Joachim N.; Graf, Heinz-Gerd; Harendt, Christine; Hutter, Franz; Nicke, Markus; Schmidt, Uwe; Schubert, Markus; Sterzel, Juergen

    2008-01-01

    A 664 × 664 element Active Pixel image Sensor (APS) with integrated analog signal processing, full frame synchronous shutter and random access for applications in star sensors is presented and discussed. A thick vertical diode array in Thin Film on CMOS (TFC) technology is explored to achieve radiation hardness and maximum fill factor.

  6. Fabrication and characterization of CMOS-MEMS thermoelectric micro generators.

    PubMed

    Kao, Pin-Hsu; Shih, Po-Jen; Dai, Ching-Liang; Liu, Mao-Chen

    2010-01-01

    This work presents a thermoelectric micro generator fabricated by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and the post-CMOS process. The micro generator is composed of 24 thermocouples in series. Each thermocouple is constructed by p-type and n-type polysilicon strips. The output power of the generator depends on the temperature difference between the hot and cold parts in the thermocouples. In order to prevent heat-receiving in the cold part in the thermocouples, the cold part is covered with a silicon dioxide layer with low thermal conductivity to insulate the heat source. The hot part of the thermocouples is suspended and connected to an aluminum plate, to increases the heat-receiving area in the hot part. The generator requires a post-CMOS process to release the suspended structures. The post-CMOS process uses an anisotropic dry etching to remove the oxide sacrificial layer and an isotropic dry etching to etch the silicon substrate. Experimental results show that the micro generator has an output voltage of 67 μV at the temperature difference of 1 K. PMID:22205869

  7. Spectrometer with CMOS demodulation of fiber optic Bragg grating sensors

    NASA Astrophysics Data System (ADS)

    Christiansen, Martin Brokner

    A CMOS imager based spectrometer is developed to interrogate a network containing a large number of Bragg grating sensors. The spectrometer uses a Prism-Grating- Prism (PGP) to spectrally separate serially multiplexed Bragg reflections on a single fiber. As a result, each Bragg grating produces a discrete spot on the CMOS imager that shifts horizontally as the Bragg grating experiences changes in strain or temperature. The reflected wavelength of the spot can be determined by finding the center of the spot produced. The use of a randomly addressable CMOS imager enables a flexible sampling rate. Some fibers can be interrogated at a high sampling rate while others can be interrogated at a low sampling rate. However, the use of a CMOS imager leads to several unique problems in terms of signal processing. These include a logarithmic pixel response, a low signal-to-noise ratio, a long pixel time constant, and software issues. The expected capabilities of the CMOS imager based spectrometer are determined with a theoretical model. The theoretical model tests three algorithms for determining the center of the spot: single row centroid, single row parabolic fit, and entire spot centroid. The theoretical results are compared to laboratory test data and field test data. The CMOS based spectrometer is capable of interrogating many optical fibers, and in the configuration tested, the fiber bundle consisted of 23 fibers. Using this system, a single fiber can be interrogated from 778 nm to 852 nm at 2100 Hz or multiple fibers can be interrogated over the same wavelength so that the total number of fiber interrogations is up to 2100 per second. The reflected Bragg wavelength can be determined within +/-3pm, corresponding to a +/-3μɛ uncertainty.

  8. Characterization of Depleted Monolithic Active Pixel detectors implemented with a high-resistive CMOS technology

    NASA Astrophysics Data System (ADS)

    Kishishita, T.; Hemperek, T.; Rymaszewski, P.; Hirono, T.; Krüger, H.; Wermes, N.

    2016-07-01

    We present the recent development of DMAPS (Depleted Monolithic Active Pixel Sensor), implemented with a Toshiba 130 nm CMOS process. Unlike in the case of standard MAPS technologies which are based on an epi-layer, this process provides a high-resistive substrate that enables larger signal and faster charge collection by drift in a 50 - 300 μm thick depleted layer. Since this process also enables the use of deep n-wells to isolate the collection electrodes from the thin active device layer, NMOS and PMOS transistors are available for the readout electronics in each pixel cell. In order to characterize the technology, we implemented a simple three transistor readout with a variety of pixel pitches and input FET sizes. This layout variety gives us a clue on sensor characteristics for future optimization, such as the input detector capacitance or leakage current. In the initial measurement, the radiation spectra were obtained from 55Fe with an energy resolution of 770 eV (FWHM) and 90Sr with the MVP of 4165 e-.

  9. CMOS Time-Resolved, Contact, and Multispectral Fluorescence Imaging for DNA Molecular Diagnostics

    PubMed Central

    Guo, Nan; Cheung, Ka Wai; Wong, Hiu Tung; Ho, Derek

    2014-01-01

    Instrumental limitations such as bulkiness and high cost prevent the fluorescence technique from becoming ubiquitous for point-of-care deoxyribonucleic acid (DNA) detection and other in-field molecular diagnostics applications. The complimentary metal-oxide-semiconductor (CMOS) technology, as benefited from process scaling, provides several advanced capabilities such as high integration density, high-resolution signal processing, and low power consumption, enabling sensitive, integrated, and low-cost fluorescence analytical platforms. In this paper, CMOS time-resolved, contact, and multispectral imaging are reviewed. Recently reported CMOS fluorescence analysis microsystem prototypes are surveyed to highlight the present state of the art. PMID:25365460

  10. A novel multi-actuation CMOS RF MEMS switch

    NASA Astrophysics Data System (ADS)

    Lee, Chiung-I.; Ko, Chih-Hsiang; Huang, Tsun-Che

    2008-12-01

    This paper demonstrates a capacitive shunt type RF MEMS switch, which is actuated by electro-thermal actuator and electrostatic actuator at the same time, and than latching the switching status by electrostatic force only. Since thermal actuators need relative low voltage compare to electrostatic actuators, and electrostatic force needs almost no power to maintain the switching status, the benefits of the mechanism are very low actuation voltage and low power consumption. Moreover, the RF MEMS switch has considered issues for integrated circuit compatible in design phase. So the switch is fabricated by a standard 0.35um 2P4M CMOS process and uses wet etching and dry etching technologies for postprocess. This compatible ability is important because the RF characteristics are not only related to the device itself. If a packaged RF switch and a packaged IC wired together, the parasitic capacitance will cause the problem for optimization. The structure of the switch consists of a set of CPW transmission lines and a suspended membrane. The CPW lines and the membrane are in metal layers of CMOS process. Besides, the electro-thermal actuators are designed by polysilicon layer of the CMOS process. So the RF switch is only CMOS process layers needed for both electro-thermal and electrostatic actuations in switch. The thermal actuator is composed of a three-dimensional membrane and two heaters. The membrane is a stacked step structure including two metal layers in CMOS process, and heat is generated by poly silicon resistors near the anchors of membrane. Measured results show that the actuation voltage of the switch is under 7V for electro-thermal added electrostatic actuation.

  11. A novel colour-sensitive CMOS detector

    NASA Astrophysics Data System (ADS)

    Langfelder, G.; Longoni, A.; Zaraga, F.

    2009-10-01

    A novel colour-sensitive semiconductor detector is proposed. The device (named Transverse Field Detector (TFD)) can be used to measure the colour of the incident light without any colour filter. The device is completely compatible with standard CMOS processes and is suitable to be integrated in a pixel array for imaging purposes. The working principle is based on the capability of this device to collect at different superficial junctions the carriers, generated at different depths, by means of suitable transverse electric fields. The transverse components of the electric field are generated inside the depleted region by a suitable bias of the superficial junctions. Thanks to the differences in the light absorption coefficients at different wavelengths, the device performs colour separation. Among the advantages of this approach are the capability of an active tuning of the pixel colour response, which can be obtained just by changing the biasing values of collecting junctions, and foreseen higher colour fidelity, thanks to the easy extension to four colour pixels. First test structures of three colours TFD pixels were designed and built in a standard CMOS 90 nm technology. Operative principles of the device and first experimental results are presented.

  12. Fully CMOS analog and digital SiPMs

    NASA Astrophysics Data System (ADS)

    Zou, Yu; Villa, Federica; Bronzi, Danilo; Tisa, Simone; Tosi, Alberto; Zappa, Franco

    2015-03-01

    Silicon Photomultipliers (SiPMs) are emerging single photon detectors used in many applications requiring large active area, photon-number resolving capability and immunity to magnetic fields. We present three families of analog SiPM fabricated in a reliable and cost-effective fully standard planar CMOS technology with a total photosensitive area of 1×1 mm2. These three families have different active areas with fill-factors (21%, 58.3%, 73.7%) comparable to those of commercial SiPM, which are developed in vertical (current flow) custom technologies. The peak photon detection efficiency in the near-UV tops at 38% (fill-factor included) comparable to commercial custom-process ones and dark count rate density is just a little higher than the best-in-class commercial analog SiPMs. Thanks to the CMOS processing, these new SiPMs can be integrated together with active components and electronics both within the microcell and on-chip, in order to act at the microcell level or to perform global pre-processing. We also report CMOS digital SiPMs in the same standard CMOS technology, based on microcells with digitalized processing, all integrated on-chip. This CMOS digital SiPMs has four 32×1 cells (128 microcells), each consisting of SPAD, active quenching circuit with adjustable dead time, digital control (to switch off noisy SPADs and readout position of detected photons), and fast trigger output signal. The achieved 20% fill-factor is still very good.

  13. Planar CMOS analog SiPMs: design, modeling, and characterization

    NASA Astrophysics Data System (ADS)

    Zou, Yu; Villa, Federica; Bronzi, Danilo; Tisa, Simone; Tosi, Alberto; Zappa, Franco

    2015-11-01

    Silicon photomultipliers (SiPMs) are large area detectors consisting of an array of single-photon-sensitive microcells, which make SiPMs extremely attractive to substitute the photomultiplier tubes in many applications. We present the design, fabrication, and characterization of analog SiPMs in standard planar 0.35 μm CMOS technology, with about 1 mm × 1 mm total area and different kinds of microcells, based on single-photon avalanche diodes with 30 μm diameter reaching 21.0% fill-factor (FF), 50 μm diameter (FF = 58.3%) or 50 μm square active area with rounded corner of 5 μm radius (FF = 73.7%). We also developed the electrical SPICE model for CMOS SiPMs. Our CMOS SiPMs have 25 V breakdown voltage, in line with most commercial SiPMs and higher gain (8.8 × 106, 13.2 × 106, and 15.0 × 106, respectively). Although dark count rate density is slightly higher than state-of-the-art analog SiPMs, the proposed standard CMOS processing opens the feasibility of integration with active electronics, for switching hot pixels off, drastically reducing the overall dark count rate, or for further on-chip processing.

  14. A multi-mode multi-band RF receiver front-end for a TD-SCDMA/LTE/LTE-advanced in 0.18-μm CMOS process

    NASA Astrophysics Data System (ADS)

    Rui, Guo; Haiying, Zhang

    2012-09-01

    A fully integrated multi-mode multi-band directed-conversion radio frequency (RF) receiver front-end for a TD-SCDMA/LTE/LTE-advanced is presented. The front-end employs direct-conversion design, and consists of two differential tunable low noise amplifiers (LNA), a quadrature mixer, and two intermediate frequency (IF) amplifiers. The two independent tunable LNAs are used to cover all the four frequency bands, achieving sufficient low noise and high gain performance with low power consumption. Switched capacitor arrays perform a resonant frequency point calibration for the LNAs. The two LNAs are combined at the driver stage of the mixer, which employs a folded double balanced Gilbert structure, and utilizes PMOS transistors as local oscillator (LO) switches to reduce flicker noise. The front-end has three gain modes to obtain a higher dynamic range. Frequency band selection and mode of configuration is realized by an on-chip serial peripheral interface (SPI) module. The front-end is fabricated in a TSMC 0.18-μm RF CMOS process and occupies an area of 1.3 mm2. The measured double-sideband (DSB) noise figure is below 3.5 dB and the conversion gain is over 43 dB at all of the frequency bands. The total current consumption is 31 mA from a 1.8-V supply.

  15. Beyond CMOS: heterogeneous integration of III-V devices, RF MEMS and other dissimilar materials/devices with Si CMOS to create intelligent microsystems.

    PubMed

    Kazior, Thomas E

    2014-03-28

    Advances in silicon technology continue to revolutionize micro-/nano-electronics. However, Si cannot do everything, and devices/components based on other materials systems are required. What is the best way to integrate these dissimilar materials and to enhance the capabilities of Si, thereby continuing the micro-/nano-electronics revolution? In this paper, I review different approaches to heterogeneously integrate dissimilar materials with Si complementary metal oxide semiconductor (CMOS) technology. In particular, I summarize results on the successful integration of III-V electronic devices (InP heterojunction bipolar transistors (HBTs) and GaN high-electron-mobility transistors (HEMTs)) with Si CMOS on a common silicon-based wafer using an integration/fabrication process similar to a SiGe BiCMOS process (BiCMOS integrates bipolar junction and CMOS transistors). Our III-V BiCMOS process has been scaled to 200 mm diameter wafers for integration with scaled CMOS and used to fabricate radio-frequency (RF) and mixed signals circuits with on-chip digital control/calibration. I also show that RF microelectromechanical systems (MEMS) can be integrated onto this platform to create tunable or reconfigurable circuits. Thus, heterogeneous integration of III-V devices, MEMS and other dissimilar materials with Si CMOS enables a new class of high-performance integrated circuits that enhance the capabilities of existing systems, enable new circuit architectures and facilitate the continued proliferation of low-cost micro-/nano-electronics for a wide range of applications. PMID:24567473

  16. Beyond CMOS: heterogeneous integration of III–V devices, RF MEMS and other dissimilar materials/devices with Si CMOS to create intelligent microsystems

    PubMed Central

    Kazior, Thomas E.

    2014-01-01

    Advances in silicon technology continue to revolutionize micro-/nano-electronics. However, Si cannot do everything, and devices/components based on other materials systems are required. What is the best way to integrate these dissimilar materials and to enhance the capabilities of Si, thereby continuing the micro-/nano-electronics revolution? In this paper, I review different approaches to heterogeneously integrate dissimilar materials with Si complementary metal oxide semiconductor (CMOS) technology. In particular, I summarize results on the successful integration of III–V electronic devices (InP heterojunction bipolar transistors (HBTs) and GaN high-electron-mobility transistors (HEMTs)) with Si CMOS on a common silicon-based wafer using an integration/fabrication process similar to a SiGe BiCMOS process (BiCMOS integrates bipolar junction and CMOS transistors). Our III–V BiCMOS process has been scaled to 200 mm diameter wafers for integration with scaled CMOS and used to fabricate radio-frequency (RF) and mixed signals circuits with on-chip digital control/calibration. I also show that RF microelectromechanical systems (MEMS) can be integrated onto this platform to create tunable or reconfigurable circuits. Thus, heterogeneous integration of III–V devices, MEMS and other dissimilar materials with Si CMOS enables a new class of high-performance integrated circuits that enhance the capabilities of existing systems, enable new circuit architectures and facilitate the continued proliferation of low-cost micro-/nano-electronics for a wide range of applications. PMID:24567473

  17. CMOS self-powered monolithic light-direction sensor with digitalized output.

    PubMed

    Wang, Hongyi; Luo, Tao; Lu, Zhijian; Song, Hongjiang; Christen, Jennifer Blain

    2014-05-01

    We present a novel self-powered chip to detect the direction of incident light. This chip directly provides digitized output without the need of any off-chip power supply or optical or mechanical components. The chip was implemented in a standard 0.5 μm CMOS process. A microscale metal baffle was created by stacking all metal layers, contacts, and vias available in the process to produce on-chip shadowing. N-well/p+ photodiode arrays are located on both sides of the baffle to sense light. The photocurrent generated by a photodiode depends on the size of the photodiode and the shadowing. The shadowed area depends on the incident angle of the light. A current mirror circuit is used to compare the currents generated by the photodiodes on the opposite sides of the baffle and, consequently, provide a digital signal to indicate the incident light angle. Compared with the ideal linear digital light-angle detector with the same resolution, the presented sensor achieved the maximum error of only 2 deg over 110 deg test range. PMID:24784060

  18. Delta-Doped Back-Illuminated CMOS Imaging Arrays: Progress and Prospects

    NASA Technical Reports Server (NTRS)

    Hoenk, Michael E.; Jones, Todd J.; Dickie, Matthew R.; Greer, Frank; Cunningham, Thomas J.; Blazejewski, Edward; Nikzad, Shouleh

    2009-01-01

    In this paper, we report the latest results on our development of delta-doped, thinned, back-illuminated CMOS imaging arrays. As with charge-coupled devices, thinning and back-illumination are essential to the development of high performance CMOS imaging arrays. Problems with back surface passivation have emerged as critical to the prospects for incorporating CMOS imaging arrays into high performance scientific instruments, just as they did for CCDs over twenty years ago. In the early 1990's, JPL developed delta-doped CCDs, in which low temperature molecular beam epitaxy was used to form an ideal passivation layer on the silicon back surface. Comprising only a few nanometers of highly-doped epitaxial silicon, delta-doping achieves the stability and uniformity that are essential for high performance imaging and spectroscopy. Delta-doped CCDs were shown to have high, stable, and uniform quantum efficiency across the entire spectral range from the extreme ultraviolet through the near infrared. JPL has recently bump-bonded thinned, delta-doped CMOS imaging arrays to a CMOS readout, and demonstrated imaging. Delta-doped CMOS devices exhibit the high quantum efficiency that has become the standard for scientific-grade CCDs. Together with new circuit designs for low-noise readout currently under development, delta-doping expands the potential scientific applications of CMOS imaging arrays, and brings within reach important new capabilities, such as fast, high-sensitivity imaging with parallel readout and real-time signal processing. It remains to demonstrate manufacturability of delta-doped CMOS imaging arrays. To that end, JPL has acquired a new silicon MBE and ancillary equipment for delta-doping wafers up to 200mm in diameter, and is now developing processes for high-throughput, high yield delta-doping of fully-processed wafers with CCD and CMOS imaging devices.

  19. CMOS output buffer wave shaper

    NASA Technical Reports Server (NTRS)

    Albertson, L.; Whitaker, S.; Merrell, R.

    1990-01-01

    As the switching speeds and densities of Digital CMOS integrated circuits continue to increase, output switching noise becomes more of a problem. A design technique which aids in the reduction of switching noise is reported. The output driver stage is analyzed through the use of an equivalent RLC circuit. The results of the analysis are used in the design of an output driver stage. A test circuit based on these techniques is being submitted to MOSIS for fabrication.

  20. CMOS image sensor with contour enhancement

    NASA Astrophysics Data System (ADS)

    Meng, Liya; Lai, Xiaofeng; Chen, Kun; Yuan, Xianghui

    2010-10-01

    Imitating the signal acquisition and processing of vertebrate retina, a CMOS image sensor with bionic pre-processing circuit is designed. Integration of signal-process circuit on-chip can reduce the requirement of bandwidth and precision of the subsequent interface circuit, and simplify the design of the computer-vision system. This signal pre-processing circuit consists of adaptive photoreceptor, spatial filtering resistive network and Op-Amp calculation circuit. The adaptive photoreceptor unit with a dynamic range of approximately 100 dB has a good self-adaptability for the transient changes in light intensity instead of intensity level itself. Spatial low-pass filtering resistive network used to mimic the function of horizontal cell, is composed of the horizontal resistor (HRES) circuit and OTA (Operational Transconductance Amplifier) circuit. HRES circuit, imitating dendrite of the neuron cell, comprises of two series MOS transistors operated in weak inversion region. Appending two diode-connected n-channel transistors to a simple transconductance amplifier forms the OTA Op-Amp circuit, which provides stable bias voltage for the gate of MOS transistors in HRES circuit, while serves as an OTA voltage follower to provide input voltage for the network nodes. The Op-Amp calculation circuit with a simple two-stage Op-Amp achieves the image contour enhancing. By adjusting the bias voltage of the resistive network, the smoothing effect can be tuned to change the effect of image's contour enhancement. Simulations of cell circuit and 16×16 2D circuit array are implemented using CSMC 0.5μm DPTM CMOS process.

  1. Steps toward fabricating cryogenic CMOS compatible single electron devices for future qubits.

    SciTech Connect

    Wendt, Joel Robert; Childs, Kenton David; Ten Eyck, Gregory A.; Tracy, Lisa A.; Eng, Kevin; Stevens, Jeffrey; Nordberg, Eric; Carroll, Malcolm S.; Lilly, Michael Patrick

    2008-08-01

    We describe the development of a novel silicon quantum bit (qubit) device architecture that involves using materials that are compatible with a Sandia National Laboratories (SNL) 0.35 mum complementary metal oxide semiconductor (CMOS) process intended to operate at 100 mK. We describe how the qubit structure can be integrated with CMOS electronics, which is believed to have advantages for critical functions like fast single electron electrometry for readout compared to current approaches using radio frequency techniques. Critical materials properties are reviewed and preliminary characterization of the SNL CMOS devices at 4.2 K is presented.

  2. CMOS downsizing toward sub-10 nm

    NASA Astrophysics Data System (ADS)

    Iwai, Hiroshi

    2004-04-01

    Recently, CMOS downsizing has been accelerated very aggressively in both production and research level, and even transistor operation of a 6 nm gate length p-channel MOSFET was reported in a conference. However, many serious problems are expected for implementing such small-geometry MOSFETs into large scale integrated circuits, and it is still questionable whether we can successfully introduce sub-10 nm CMOS LSIs into the market or not. In this paper, limitation and its possible causes for the downscaling of CMOS towards sub-10 nm are discussed with consideration of past CMOS predictions for the limitation.

  3. Research-grade CMOS image sensors for remote sensing applications

    NASA Astrophysics Data System (ADS)

    Saint-Pe, Olivier; Tulet, Michel; Davancens, Robert; Larnaudie, Franck; Magnan, Pierre; Martin-Gonthier, Philippe; Corbiere, Franck; Belliot, Pierre; Estribeau, Magali

    2004-11-01

    Imaging detectors are key elements for optical instruments and sensors on board space missions dedicated to Earth observation (high resolution imaging, atmosphere spectroscopy...), Solar System exploration (micro cameras, guidance for autonomous vehicle...) and Universe observation (space telescope focal planes, guiding sensors...). This market has been dominated by CCD technology for long. Since the mid-90s, CMOS Image Sensors (CIS) have been competing with CCDs for consumer domains (webcams, cell phones, digital cameras...). Featuring significant advantages over CCD sensors for space applications (lower power consumption, smaller system size, better radiations behaviour...), CMOS technology is also expanding in this field, justifying specific R&D and development programs funded by national and European space agencies (mainly CNES, DGA and ESA). All along the 90s and thanks to their increasingly improving performances, CIS have started to be successfully used for more and more demanding space applications, from vision and control functions requiring low-level performances to guidance applications requiring medium-level performances. Recent technology improvements have made possible the manufacturing of research-grade CIS that are able to compete with CCDs in the high-performances arena. After an introduction outlining the growing interest of optical instruments designers for CMOS image sensors, this paper will present the existing and foreseen ways to reach high-level electro-optics performances for CIS. The developments and performances of CIS prototypes built using an imaging CMOS process will be presented in the corresponding section.

  4. Research-grade CMOS image sensors for demanding space applications

    NASA Astrophysics Data System (ADS)

    Saint-Pé, Olivier; Tulet, Michel; Davancens, Robert; Larnaudie, Franck; Magnan, Pierre; Corbière, Franck; Martin-Gonthier, Philippe; Belliot, Pierre

    2004-06-01

    Imaging detectors are key elements for optical instruments and sensors on board space missions dedicated to Earth observation (high resolution imaging, atmosphere spectroscopy...), Solar System exploration (micro cameras, guidance for autonomous vehicle...) and Universe observation (space telescope focal planes, guiding sensors...). This market has been dominated by CCD technology for long. Since the mid-90s, CMOS Image Sensors (CIS) have been competing with CCDs for more and more consumer domains (webcams, cell phones, digital cameras...). Featuring significant advantages over CCD sensors for space applications (lower power consumption, smaller system size, better radiations behaviour...), CMOS technology is also expanding in this field, justifying specific R&D and development programs funded by national and European space agencies (mainly CNES, DGA, and ESA). All along the 90s and thanks to their increasingly improving performances, CIS have started to be successfully used for more and more demanding applications, from vision and control functions requiring low-level performances to guidance applications requiring medium-level performances. Recent technology improvements have made possible the manufacturing of research-grade CIS that are able to compete with CCDs in the high-performances arena. After an introduction outlining the growing interest of optical instruments designers for CMOS image sensors, this talk will present the existing and foreseen ways to reach high-level electro-optics performances for CIS. The developments of CIS prototypes built using an imaging CMOS process and of devices based on improved designs will be presented.

  5. A programmable second order oversampling CMOS sigma-delta analog-to-digital converter for low-power sensor interface electronics

    NASA Astrophysics Data System (ADS)

    Soundararajan, R.; Srivastava, A.; Xu, Y.

    2010-04-01

    A programmable second order oversampling sigma-delta analog-to-digital converter (ADC) is designed and fabricated in 0.5 μm n-well CMOS process for low-power interface electronics of a sensor node in wireless sensor networks. The sigma-delta ADC can be programmed to operate at three different oversampling ratios of 16, 32, and 64 to give three different resolutions of 9, 12 and 14 bits, respectively which impact the power consumption of the sensor module. The major part of power is consumed in the decimator of the ADC by the integrators which operate at the highest sampling rate. Hence, an alternate design is introduced in the integrator stages by inserting sign extension coder circuits and reusing the same integrators for different resolutions and oversampling ratios. The programmable ADC can be interfaced with on or off-chip nanosensors for detection of traces of toxic gases and chemicals.

  6. Novel CMOS readout techniques for uncooled pyroelectric IR FPA

    NASA Astrophysics Data System (ADS)

    Sun, Tai-Ping; Chin, Yuan-Lung; Chung, Wen-Yaw; Hsiung, Shen-Kan; Chou, Jung-Chuan

    1998-09-01

    Based on the application of the source follower per detector (SFD) input biasing technique, a new redout structure for the IR focal-plane-array (FPA), called the variable gain source follower per detector (VGSFD) is proposed and analyzed. The readout circuit of VGSFD of a unit cell of pyroelectric sensor under investigation, is composed of a source follower per detector circuit, high gain amplifier, and the reset switch. The VGSFD readout chip has been designed in 0.5 micrometers double-poly-double-metal n-well CMOS technology in various formats from 8 by 8 to 128 by 128. The experimental 8 by 8 VGSFD measurement results of the fabricated readout chip at room temperature have successfully verified both the readout function and performance. The high gain, low power, high sensitivity readout performances are achieved in a 50 by 50 micrometers (superscript 2) pixel size.

  7. Development of radiation hard CMOS active pixel sensors for HL-LHC

    NASA Astrophysics Data System (ADS)

    Pernegger, Heinz

    2016-07-01

    New pixel detectors, based on commercial high voltage and/or high resistivity full CMOS processes, hold promise as next-generation active pixel sensors for inner and intermediate layers of the upgraded ATLAS tracker. The use of commercial CMOS processes allow cost-effective detector construction and simpler hybridisation techniques. The paper gives an overview of the results obtained on AMS-produced CMOS sensors coupled to the ATLAS Pixel FE-I4 readout chips. The SOI (silicon-on-insulator) produced sensors by XFAB hold great promise as radiation hard SOI-CMOS sensors due to their combination of partially depleted SOI transistors reducing back-gate effects. The test results include pre-/post-irradiation comparison, measurements of charge collection regions as well as test beam results.

  8. Monolithic active pixel sensors (MAPS) in a VLSI CMOS technology

    NASA Astrophysics Data System (ADS)

    Turchetta, R.; French, M.; Manolopoulos, S.; Tyndel, M.; Allport, P.; Bates, R.; O'Shea, V.; Hall, G.; Raymond, M.

    2003-03-01

    Monolithic Active Pixel Sensors (MAPS) designed in a standard VLSI CMOS technology have recently been proposed as a compact pixel detector for the detection of high-energy charged particle in vertex/tracking applications. MAPS, also named CMOS sensors, are already extensively used in visible light applications. With respect to other competing imaging technologies, CMOS sensors have several potential advantages in terms of low cost, low power, lower noise at higher speed, random access of pixels which allows windowing of region of interest, ability to integrate several functions on the same chip. This brings altogether to the concept of 'camera-on-a-chip'. In this paper, we review the use of CMOS sensors for particle physics and we analyse their performances in term of the efficiency (fill factor), signal generation, noise, readout speed and sensor area. In most of high-energy physics applications, data reduction is needed in the sensor at an early stage of the data processing before transfer of the data to tape. Because of the large number of pixels, data reduction is needed on the sensor itself or just outside. This brings in stringent requirements on the temporal noise as well as to the sensor uniformity, expressed as a Fixed Pattern Noise (FPN). A pixel architecture with an additional transistor is proposed. This architecture, coupled to correlated double sampling of the signal will allow cancellation of the two dominant noise sources, namely the reset or kTC noise and the FPN. A prototype has been designed in a standard 0.25 μm CMOS technology. It has also a structure for electrical calibration of the sensor. The prototype is functional and detailed tests are under way.

  9. Nanosecond monolithic CMOS readout cell

    DOEpatents

    Souchkov, Vitali V.

    2004-08-24

    A pulse shaper is implemented in monolithic CMOS with a delay unit formed of a unity gain buffer. The shaper is formed of a difference amplifier having one input connected directly to an input signal and a second input connected to a delayed input signal through the buffer. An elementary cell is based on the pulse shaper and a timing circuit which gates the output of an integrator connected to the pulse shaper output. A detector readout system is formed of a plurality of elementary cells, each connected to a pixel of a pixel array, or to a microstrip of a plurality of microstrips, or to a detector segment.

  10. CMOS foveal image sensor chip

    NASA Technical Reports Server (NTRS)

    Bandera, Cesar (Inventor); Scott, Peter (Inventor); Sridhar, Ramalingam (Inventor); Xia, Shu (Inventor)

    2002-01-01

    A foveal image sensor integrated circuit comprising a plurality of CMOS active pixel sensors arranged both within and about a central fovea region of the chip. The pixels in the central fovea region have a smaller size than the pixels arranged in peripheral rings about the central region. A new photocharge normalization scheme and associated circuitry normalizes the output signals from the different size pixels in the array. The pixels are assembled into a multi-resolution rectilinear foveal image sensor chip using a novel access scheme to reduce the number of analog RAM cells needed. Localized spatial resolution declines monotonically with offset from the imager's optical axis, analogous to biological foveal vision.

  11. Biosensor system-on-a-chip including CMOS-based signal processing circuits and 64 carbon nanotube-based sensors for the detection of a neurotransmitter.

    PubMed

    Lee, Byung Yang; Seo, Sung Min; Lee, Dong Joon; Lee, Minbaek; Lee, Joohyung; Cheon, Jun-Ho; Cho, Eunju; Lee, Hyunjoong; Chung, In-Young; Park, Young June; Kim, Suhwan; Hong, Seunghun

    2010-04-01

    We developed a carbon nanotube (CNT)-based biosensor system-on-a-chip (SoC) for the detection of a neurotransmitter. Here, 64 CNT-based sensors were integrated with silicon-based signal processing circuits in a single chip, which was made possible by combining several technological breakthroughs such as efficient signal processing, uniform CNT networks, and biocompatible functionalization of CNT-based sensors. The chip was utilized to detect glutamate, a neurotransmitter, where ammonia, a byproduct of the enzymatic reaction of glutamate and glutamate oxidase on CNT-based sensors, modulated the conductance signals to the CNT-based sensors. This is a major technological advancement in the integration of CNT-based sensors with microelectronics, and this chip can be readily integrated with larger scale lab-on-a-chip (LoC) systems for various applications such as LoC systems for neural networks. PMID:20300676

  12. A back-illuminated megapixel CMOS image sensor

    NASA Technical Reports Server (NTRS)

    Pain, Bedabrata; Cunningham, Thomas; Nikzad, Shouleh; Hoenk, Michael; Jones, Todd; Wrigley, Chris; Hancock, Bruce

    2005-01-01

    In this paper, we present the test and characterization results for a back-illuminated megapixel CMOS imager. The imager pixel consists of a standard junction photodiode coupled to a three transistor-per-pixel switched source-follower readout [1]. The imager also consists of integrated timing and control and bias generation circuits, and provides analog output. The analog column-scan circuits were implemented in such a way that the imager could be configured to run in off-chip correlated double-sampling (CDS) mode. The imager was originally designed for normal front-illuminated operation, and was fabricated in a commercially available 0.5 pn triple-metal CMOS-imager compatible process. For backside illumination, the imager was thinned by etching away the substrate was etched away in a post-fabrication processing step.

  13. Hardening of commercial CMOS PROMs with polysilicon fusible links

    NASA Technical Reports Server (NTRS)

    Newman, W. H.; Rauchfuss, J. E.

    1985-01-01

    The method by which a commercial 4K CMOS PROM with polysilicon fuses was hardened and the feasibility of applying this method to a 16K PROM are presented. A description of the process and the necessary minor modifications to the original layout are given. The PROM circuit and discrete device characteristics over radiation to 1000K rad-Si are summarized. The dose rate sensitivity of the 4K PROMs is also presented.

  14. A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass

    PubMed Central

    Khir, Mohd Haris Md; Qu, Peng; Qu, Hongwei

    2011-01-01

    This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive sensing material. A full Wheatstone bridge was constructed through easy wiring allowed by the three metal layers in the 0.5 μm CMOS technology. The device fabrication process consisted of a standard CMOS process for sensor configuration, and a deep reactive ion etching (DRIE) based post-CMOS microfabrication for MEMS structure release. A bulk single-crystal silicon (SCS) substrate is included in the proof mass to increase sensor sensitivity. In device design and analysis, the self heating of the polysilicon piezoresistors and its effect to the sensor performance is also discussed. With a low operating power of 1.5 mW, the accelerometer demonstrates a sensitivity of 0.077 mV/g prior to any amplification. Dynamic tests have been conducted with a high-end commercial calibrating accelerometer as reference. PMID:22164052

  15. Accelerated life testing effects on CMOS microcircuit characteristics

    NASA Technical Reports Server (NTRS)

    1977-01-01

    Accelerated life tests were performed on CMOS microcircuits to predict their long term reliability. The consistency of the CMOS microcircuit activation energy between the range of 125 C to 200 C and the range 200 C to 250 C was determined. Results indicate CMOS complexity and the amount of moisture detected inside the devices after testing influences time to failure of tested CMOS devices.

  16. Improved Space Object Orbit Determination Using CMOS Detectors

    NASA Astrophysics Data System (ADS)

    Schildknecht, T.; Peltonen, J.; Sännti, T.; Silha, J.; Flohrer, T.

    2014-09-01

    CMOS-sensors, or in general Active Pixel Sensors (APS), are rapidly replacing CCDs in the consumer camera market. Due to significant technological advances during the past years these devices start to compete with CCDs also for demanding scientific imaging applications, in particular in the astronomy community. CMOS detectors offer a series of inherent advantages compared to CCDs, due to the structure of their basic pixel cells, which each contains their own amplifier and readout electronics. The most prominent advantages for space object observations are the extremely fast and flexible readout capabilities, feasibility for electronic shuttering and precise epoch registration, and the potential to perform image processing operations on-chip and in real-time. The major challenges and design drivers for ground-based and space-based optical observation strategies have been analyzed. CMOS detector characteristics were critically evaluated and compared with the established CCD technology, especially with respect to the above mentioned observations. Similarly, the desirable on-chip processing functionalities which would further enhance the object detection and image segmentation were identified. Finally, we simulated several observation scenarios for ground- and space-based sensor by assuming different observation and sensor properties. We will introduce the analyzed end-to-end simulations of the ground- and space-based strategies in order to investigate the orbit determination accuracy and its sensitivity which may result from different values for the frame-rate, pixel scale, astrometric and epoch registration accuracies. Two cases were simulated, a survey using a ground-based sensor to observe objects in LEO for surveillance applications, and a statistical survey with a space-based sensor orbiting in LEO observing small-size debris in LEO. The ground-based LEO survey uses a dynamical fence close to the Earth shadow a few hours after sunset. For the space-based scenario

  17. Low-frequency noise reduction in vertical MOSFETs having tunable threshold voltage fabricated with 60 nm CMOS technology on 300 mm wafer process

    NASA Astrophysics Data System (ADS)

    Imamoto, Takuya; Ma, Yitao; Muraguchi, Masakazu; Endoh, Tetsuo

    2015-04-01

    In this paper, DC and low-frequency noise (LFN) characteristics have been investigated with actual measurement data in both n- and p-type vertical MOSFETs (V-MOSFETs) for the first time. The V-MOSFETs which was fabricated on 300 mm bulk silicon wafer process have realized excellent DC performance and a significant reduction of flicker (1/f) noise. The measurement results show that the fabricated V-MOSFETs with 60 nm silicon pillar and 100 nm gate length achieve excellent steep sub-threshold swing (69 mV/decade for n-type and 66 mV/decade for p-type), good on-current (281 µA/µm for n-type 149 µA/µm for p-type), low off-leakage current (28.1 pA/µm for n-type and 79.6 pA/µm for p-type), and excellent on-off ratio (1 × 107 for n-type and 2 × 106 for p-type). In addition, it is demonstrated that our fabricated V-MOSFETs can control the threshold voltage (Vth) by changing the channel doping condition, which is the useful and low-cost technique as it has been widely used in the conventional bulk planar MOSFET. This result indicates that V-MOSFETs can control Vth more finely and flexibly by the combined the use of the doping technique with other techniques such as work function engineering of metal-gate. Moreover, it is also shown that V-MOSFETs can suppress 1/f noise (L\\text{gate}WS\\text{Id}/I\\text{d}2 of 10-13-10-11 µm2/Hz for n-type and 10-12-10-10 µm2/Hz for p-type) to one or two order lower level than previously reported nanowire type MOSFET, FinFET, Tri-Gate, and planar MOSFETs. The results have also proved that both DC and 1/f noise performances are independent from the bias voltage which is applied to substrate or well layer. Therefore, it is verified that V-MOSFETs can eliminate the effects from substrate or well layer, which always adversely affects the circuit performances due to this serial connection.

  18. A photovoltaic-driven and energy-autonomous CMOS implantable sensor.

    PubMed

    Ayazian, Sahar; Akhavan, Vahid A; Soenen, Eric; Hassibi, Arjang

    2012-08-01

    An energy-autonomous, photovoltaic (PV)-driven and MRI-compatible CMOS implantable sensor is presented. On-chip P+/N-well diode arrays are used as CMOS-compatible PV cells to harvest μW's of power from the light that penetrates into the tissue. In this 2.5 mm × 2.5 mm sub-μW integrated system, the in-vivo physiological signals are first measured by using a subthreshold ring oscillator-based sensor, the acquired data is then modulated into a frequency-shift keying (FSK) signal, and finally transmitted neuromorphically to the skin surface by using a pair of polarized electrodes. PMID:23853178

  19. TID Simulation of Advanced CMOS Devices for Space Applications

    NASA Astrophysics Data System (ADS)

    Sajid, Muhammad

    2016-07-01

    This paper focuses on Total Ionizing Dose (TID) effects caused by accumulation of charges at silicon dioxide, substrate/silicon dioxide interface, Shallow Trench Isolation (STI) for scaled CMOS bulk devices as well as at Buried Oxide (BOX) layer in devices based on Silicon-On-Insulator (SOI) technology to be operated in space radiation environment. The radiation induced leakage current and corresponding density/concentration electrons in leakage current path was presented/depicted for 180nm, 130nm and 65nm NMOS, PMOS transistors based on CMOS bulk as well as SOI process technologies on-board LEO and GEO satellites. On the basis of simulation results, the TID robustness analysis for advanced deep sub-micron technologies was accomplished up to 500 Krad. The correlation between the impact of technology scaling and magnitude of leakage current with corresponding total dose was established utilizing Visual TCAD Genius program.

  20. A CMOS image sensor dedicated to medical gamma camera application

    NASA Astrophysics Data System (ADS)

    Salahuddin, Nur S.; Paindavoine, Michel; Ginhac, Dominique; Parmentier, Michel; Tamda, Najia

    2005-03-01

    Generally, medical Gamma Camera are based on the Anger principle. These cameras use a scintillator block coupled to a bulky array of photomultiplier tube (PMT). To simplify this, we designed a new integrated CMOS image sensor in order to replace bulky PMT photodetetors. We studied several photodiodes sensors including current mirror amplifiers. These photodiodes have been fabricated using a CMOS 0.6 micrometers process from Austria Mikro Systeme (AMS). Each sensor pixel in the array occupies respectively, 1mm x 1mm area, 0.5mm x 0.5mm area and 0.2mm 0.2mm area with fill factor 98 % and total chip area is 2 square millimeters. The sensor pixels show a logarithmic response in illumination and are capable of detecting very low green light emitting diode (less than 0.5 lux) . These results allow to use our sensor in new Gamma Camera solid-state concept.

  1. Fundamental performance differences between CMOS and CCD imagers: Part II

    NASA Astrophysics Data System (ADS)

    Janesick, James; Andrews, James; Tower, John; Grygon, Mark; Elliott, Tom; Cheng, John; Lesser, Michael; Pinter, Jeff

    2007-09-01

    A new class of CMOS imagers that compete with scientific CCDs is presented. The sensors are based on deep depletion backside illuminated technology to achieve high near infrared quantum efficiency and low pixel cross-talk. The imagers deliver very low read noise suitable for single photon counting - Fano-noise limited soft x-ray applications. Digital correlated double sampling signal processing necessary to achieve low read noise performance is analyzed and demonstrated for CMOS use. Detailed experimental data products generated by different pixel architectures (notably 3TPPD, 5TPPD and 6TPG designs) are presented including read noise, charge capacity, dynamic range, quantum efficiency, charge collection and transfer efficiency and dark current generation. Radiation damage data taken for the imagers is also reported.

  2. A fully integrated CMOS inverse sine circuit for computational systems

    NASA Astrophysics Data System (ADS)

    Seon, Jong-Kug

    2010-08-01

    An inverse trigonometric function generator using CMOS technology is presented and implemented. The development and synthesis of inverse trigonometric functional circuits based on the simple approximation equations are also introduced. The proposed inverse sine function generator has the infinite input range and can be used in many measurement and instrumentation systems. The nonlinearity of less than 2.8% for the entire input range of 0.5 Vp-p with a small-signal bandwidth of 3.2 MHz is achieved. The chip implemented in 0.25 μm CMOS process operates from a single 1.8 V supply. The measured power consumption and the active chip area of the inverse sine function circuit are 350 μW and 0.15 mm2, respectively.

  3. Monolithic CMOS-MEMS integration for high-g accelerometers

    NASA Astrophysics Data System (ADS)

    Narasimhan, Vinayak; Li, Holden; Tan, Chuan Seng

    2014-10-01

    This paper highlights work-in-progress towards the conceptualization, simulation, fabrication and initial testing of a silicon-germanium (SiGe) integrated CMOS-MEMS high-g accelerometer for military, munition, fuze and shock measurement applications. Developed on IMEC's SiGe MEMS platform, the MEMS offers a dynamic range of 5,000 g and a bandwidth of 12 kHz. The low noise readout circuit adopts a chopper-stabilization technique implementing the CMOS through the TSMC 0.18 µm process. The device structure employs a fully differential split comb-drive set up with two sets of stators and a rotor all driven separately. Dummy structures acting as protective over-range stops were designed to protect the active components when under impacts well above the designed dynamic range.

  4. Diffuse reflectance measurements using lensless CMOS imaging chip

    NASA Astrophysics Data System (ADS)

    Schelkanova, I.; Pandya, A.; Shah, D.; Lilge, L.; Douplik, A.

    2014-10-01

    To assess superficial epithelial microcirculation, a diagnostic tool should be able to detect the heterogeneity of microvasculature, and to monitor qualitative derangement of perfusion in a diseased condition. Employing a lensless CMOS imaging chip with an RGB Bayer filter, experiments were conducted with a microfluidic platform to obtain diffuse reflectance maps. Haemoglobin (Hb) solution (160 g/l) was injected in the periodic channels (grooves) of the microfluidic phantom which were covered with ~250 μm thick layer of intralipid to obtain a diffusive environment. Image processing was performed on data acquired on the surface of the phantom to evaluate the diffuse reflectance from the subsurface periodic pattern. Thickness of the microfluidic grooves, the wavelength dependent contrast between Hb and the background, and effective periodicity of the grooves were evaluated. Results demonstrate that a lens-less CMOS camera is capable of capturing images of subsurface structures with large field of view.

  5. High-Voltage-Input Level Translator Using Standard CMOS

    NASA Technical Reports Server (NTRS)

    Yager, Jeremy A.; Mojarradi, Mohammad M.; Vo, Tuan A.; Blalock, Benjamin J.

    2011-01-01

    proposed integrated circuit would translate (1) a pair of input signals having a low differential potential and a possibly high common-mode potential into (2) a pair of output signals having the same low differential potential and a low common-mode potential. As used here, "low" and "high" refer to potentials that are, respectively, below or above the nominal supply potential (3.3 V) at which standard complementary metal oxide/semiconductor (CMOS) integrated circuits are designed to operate. The input common-mode potential could lie between 0 and 10 V; the output common-mode potential would be 2 V. This translation would make it possible to process the pair of signals by use of standard 3.3-V CMOS analog and/or mixed-signal (analog and digital) circuitry on the same integrated-circuit chip. A schematic of the circuit is shown in the figure. Standard 3.3-V CMOS circuitry cannot withstand input potentials greater than about 4 V. However, there are many applications that involve low-differential-potential, high-common-mode-potential input signal pairs and in which standard 3.3-V CMOS circuitry, which is relatively inexpensive, would be the most appropriate circuitry for performing other functions on the integrated-circuit chip that handles the high-potential input signals. Thus, there is a need to combine high-voltage input circuitry with standard low-voltage CMOS circuitry on the same integrated-circuit chip. The proposed circuit would satisfy this need. In the proposed circuit, the input signals would be coupled into both a level-shifting pair and a common-mode-sensing pair of CMOS transistors. The output of the level-shifting pair would be fed as input to a differential pair of transistors. The resulting differential current output would pass through six standoff transistors to be mirrored into an output branch by four heterojunction bipolar transistors. The mirrored differential current would be converted back to potential by a pair of diode-connected transistors

  6. A new CMOS-based digital imaging detector for applications in mammography

    NASA Astrophysics Data System (ADS)

    Baysal, Mehmet A.; Toker, Emre

    2005-09-01

    We have developed a CMOS-based x-ray imaging detector in the same form factor of a standard film cassette (18 cm × 24 cm) for Small Field-of-view Digital Mammography (SFDM) applications. This SFDM cassette is based on our three-side buttable, 25 mm × 50 mm, 48μm active-pixel CMOS sensor modules and utilizes a 150μm columnar CsI(Tl) scintillator. For imaging up to 100 mm × 100 mm field-of-view, a number of CMOS sensor modules need to be tiled and electronically synchronized together. By using fiber-optic communication, acquired images from the SFDM cassette can be transferred, processed and displayed on a review station within approximately 5 seconds of exposure, greatly enhancing patient flow. We present the physical performance of this CMOS-based SFDM cassette, using established objective criteria such as the Modulation Transfer Function (MTF), Detective Quantum Efficiency (DQE), and more subjective criteria, by evaluating images from a phantom study and the clinical studies of our collaborators. Driven by the strong demand from the computer industry, CMOS technology is one of the lowest cost, and the most readily accessible technologies available for digital mammography today. Recent popular use of CMOS imagers in high-end consumer cameras have also resulted in significant advances in the imaging performance of CMOS sensors against rivaling CCD sensors. The SFDM cassette can be employed in various mammography applications, including spot imaging, stereotactic biopsy imaging, core biopsy and surgical biopsy specimen radiography. This study demonstrates that all the image quality requirements for demanding mammography applications can be addressed with CMOS technology.

  7. Cryogenic CMOS circuits for single charge digital readout.

    SciTech Connect

    Gurrieri, Thomas M.; Longoria, Erin Michelle; Eng, Kevin; Carroll, Malcolm S.; Hamlet, Jason R.; Young, Ralph Watson

    2010-03-01

    The readout of a solid state qubit often relies on single charge sensitive electrometry. However the combination of fast and accurate measurements is non trivial due to large RC time constants due to the electrometers resistance and shunt capacitance from wires between the cold stage and room temperature. Currently fast sensitive measurements are accomplished through rf reflectrometry. I will present an alternative single charge readout technique based on cryogenic CMOS circuits in hopes to improve speed, signal-to-noise, power consumption and simplicity in implementation. The readout circuit is based on a current comparator where changes in current from an electrometer will trigger a digital output. These circuits were fabricated using Sandia's 0.35 {micro}m CMOS foundry process. Initial measurements of comparators with an addition a current amplifier have displayed current sensitivities of < 1nA at 4.2K, switching speeds up to {approx}120ns, while consuming {approx}10 {micro}W. I will also discuss an investigation of noise characterization of our CMOS process in hopes to obtain a better understanding of the ultimate limit in signal to noise performance.

  8. Cryogenic CMOS circuits for single charge digital readout

    NASA Astrophysics Data System (ADS)

    Eng, Kevin; Gurrieri, T. M.; Hamlet, J.; Carroll, M. S.

    2010-03-01

    The readout of a solid state qubit often relies on single charge sensitive electrometry. However the combination of fast and accurate measurements is non trivial due to large RC time constants due to the electrometers resistance and shunt capacitance from wires between the cold stage and room temperature. Currently fast sensitive measurements are accomplished through rf reflectrometry. I will present an alternative single charge readout technique based on cryogenic CMOS circuits in hopes to improve speed, signal-to-noise, power consumption and simplicity in implementation. The readout circuit is based on a current comparator where changes in current from an electrometer will trigger a digital output. These circuits were fabricated using Sandia's 0.35μm CMOS foundry process. Initial measurements of comparators with an addition a current amplifier have displayed current sensitivities of < 1nA at 4.2K, switching speeds up to ˜120ns, while consuming ˜10μW. I will also discuss an investigation of noise characterization of our CMOS process in hopes to obtain a better understanding of the ultimate limit in signal to noise performance.

  9. Aluminum nitride on titanium for CMOS compatible piezoelectric transducers

    PubMed Central

    Doll, Joseph C; Petzold, Bryan C; Ninan, Biju; Mullapudi, Ravi; Pruitt, Beth L

    2010-01-01

    Piezoelectric materials are widely used for microscale sensors and actuators but can pose material compatibility challenges. This paper reports a post-CMOS compatible fabrication process for piezoelectric sensors and actuators on silicon using only standard CMOS metals. The piezoelectric properties of aluminum nitride (AlN) deposited on titanium (Ti) by reactive sputtering are characterized and microcantilever actuators are demonstrated. The film texture of the polycrystalline Ti and AlN films is improved by removing the native oxide from the silicon substrate in situ and sequentially depositing the films under vacuum to provide a uniform growth surface. The piezoelectric properties for several AlN film thicknesses are measured using laser doppler vibrometry on unpatterned wafers and released cantilever beams. The film structure and properties are shown to vary with thickness, with values of d33f, d31 and d33 of up to 2.9, −1.9 and 6.5 pm V−1, respectively. These values are comparable with AlN deposited on a Pt metal electrode, but with the benefit of a fabrication process that uses only standard CMOS metals. PMID:20333316

  10. A CMOS TDI image sensor for Earth observation

    NASA Astrophysics Data System (ADS)

    Rushton, Joseph E.; Stefanov, Konstantin D.; Holland, Andrew D.; Endicott, James; Mayer, Frederic; Barbier, Frederic

    2015-09-01

    Time Delay and Integration (TDI) is used to increase the Signal to Noise Ratio (SNR) in image sensors when imaging fast moving objects. One important TDI application is in Earth observation from space. In order to operate in the space radiation environment, the effect that radiation damage has on the performance of the image sensors must be understood. This work looks at prototype TDI sensor pixel designs, produced by e2v technologies. The sensor is a CCD-like charge transfer device, allowing in-pixel charge summation, produced on a CMOS process. The use of a CMOS process allows potential advantages such as lower power consumption, smaller pixels, higher line rate and extra on-chip functionality which can simplify system design. CMOS also allows a dedicated output amplifier per column allowing fewer charge transfers and helping to facilitate higher line rates than CCDs. In this work the effect on the pixels of radiation damage from high energy protons, at doses relevant to a low Earth orbit mission, is presented. This includes the resulting changes in Charge Transfer inefficiency (CTI) and dark signal.

  11. Polycrystalline Mercuric Iodide Films on CMOS Readout Arrays

    PubMed Central

    Hartsough, Neal E.; Iwanczyk, Jan S.; Nygard, Einar; Malakhov, Nail; Barber, William C.; Gandhi, Thulasidharan

    2009-01-01

    We have created high-resolution x-ray imaging devices using polycrystalline mercuric iodide (HgI2) films grown directly onto CMOS readout chips using a thermal vapor transport process. Images from prototype 400×400 pixel HgI2-coated CMOS readout chips are presented, where the pixel grid is 30 μm × 30 μm. The devices exhibited sensitivity of 6.2 μC/Rcm2 with corresponding dark current of ∼2.7 nA/cm2, and a 80 μm FWHM planar image response to a 50 μm slit aperture. X-ray CT images demonstrate a point spread function sufficient to obtain a 50 μm spatial resolution in reconstructed CT images at a substantially reduced dose compared to phosphor-coated readouts. The use of CMOS technology allows for small pixels (30 μm), fast readout speeds (8 fps for a 3200×3200 pixel array), and future design flexibility due to the use of well-developed fabrication processes. PMID:20161098

  12. Aluminum nitride on titanium for CMOS compatible piezoelectric transducers

    NASA Astrophysics Data System (ADS)

    Doll, Joseph C.; Petzold, Bryan C.; Ninan, Biju; Mullapudi, Ravi; Pruitt, Beth L.

    2010-02-01

    Piezoelectric materials are widely used for microscale sensors and actuators but can pose material compatibility challenges. This paper reports a post-CMOS compatible fabrication process for piezoelectric sensors and actuators on silicon using only standard CMOS metals. The piezoelectric properties of aluminum nitride (AlN) deposited on titanium (Ti) by reactive sputtering are characterized and microcantilever actuators are demonstrated. The film texture of the polycrystalline Ti and AlN films is improved by removing the native oxide from the silicon substrate in situ and sequentially depositing the films under vacuum to provide a uniform growth surface. The piezoelectric properties for several AlN film thicknesses are measured using laser doppler vibrometry on unpatterned wafers and released cantilever beams. The film structure and properties are shown to vary with thickness, with values of d33f, d31 and d33 of up to 2.9, -1.9 and 6.5 pm V-1, respectively. These values are comparable with AlN deposited on a Pt metal electrode, but with the benefit of a fabrication process that uses only standard CMOS metals.

  13. CMOS-sensors for energy-resolved X-ray imaging

    NASA Astrophysics Data System (ADS)

    Doering, D.; Amar-Youcef, S.; Baudot, J.; Deveaux, M.; Dulinski, W.; Kachel, M.; Linnik, B.; Müntz, C.; Stroth, Joachim

    2016-01-01

    Due to their low noise, CMOS Monolithic Active Pixel Sensors are suited to sense X-rays with a few keV quantum energy, which is of interest for high resolution X-ray imaging. Moreover, the good energy resolution of the silicon sensors might be used to measure this quantum energy. Combining both features with the good spatial resolution of CMOS sensors opens the potential to build ``color sensitive" X-ray cameras. Taking such colored images is hampered by the need to operate the CMOS sensors in a single photon counting mode, which restricts the photon flux capability of the sensors. More importantly, the charge sharing between the pixels smears the potentially good energy resolution of the sensors. Based on our experience with CMOS sensors for charged particle tracking, we studied techniques to overcome the latter by means of an offline processing of the data obtained from a CMOS sensor prototype. We found that the energy resolution of the pixels can be recovered at the expense of reduced quantum efficiency. We will introduce the results of our study and discuss the feasibility of taking colored X-ray pictures with CMOS sensors.

  14. Radiation-hard silicon gate bulk CMOS cell family

    SciTech Connect

    Gibbon, C. F.; Habing, D. H.; Flores, R. S.

    1980-01-01

    A radiation-hardened bulk silicon gate CMOS technology and a topologically simple, high-performance dual-port cell family utilizing this process have been demonstrated. Additional circuits, including a random logic circuit containing 4800 transistors on a 236 x 236 mil die, are presently being designed and processed. Finally, a joint design-process effort is underway to redesign the cell family in reduced design rules; this results in a factor of 2.5 cell size reduction and a factor of 3 decrease in chip interconnect area. Cell performance is correspondingly improved.

  15. Fully depleted, thick, monolithic CMOS pixels with high quantum efficiency

    NASA Astrophysics Data System (ADS)

    Clarke, A.; Stefanov, K.; Johnston, N.; Holland, A.

    2015-04-01

    The Centre for Electronic Imaging (CEI) has an active programme of evaluating and designing Complementary Metal-Oxide Semiconductor (CMOS) image sensors with high quantum efficiency, for applications in near-infrared and X-ray photon detection. This paper describes the performance characterisation of CMOS devices made on a high resistivity 50 μ m thick p-type substrate with a particular focus on determining the depletion depth and the quantum efficiency. The test devices contain 8 × 8 pixel arrays using CCD-style charge collection, which are manufactured in a low voltage CMOS process by ESPROS Photonics Corporation (EPC). Measurements include determining under which operating conditions the devices become fully depleted. By projecting a spot using a microscope optic and a LED and biasing the devices over a range of voltages, the depletion depth will change, causing the amount of charge collected in the projected spot to change. We determine if the device is fully depleted by measuring the signal collected from the projected spot. The analysis of spot size and shape is still under development.

  16. Analysis of noise characteristics for the active pixels in CMOS image sensors for X-ray imaging

    NASA Astrophysics Data System (ADS)

    Kim, Young Soo; Cho, Gyuseong; Bae, Jun-Hyung

    2006-09-01

    CMOS image sensors have poorer performance compared to conventional charge coupled devices (CCDs). Since CMOS Active Pixel Sensors (APSs) in general have higher temporal noise, higher dark current, smaller full well charge capacitance, and lower spectral response, they cannot provide the same wide dynamic range and superior signal to noise ratio as CCDs. In view of electronic noise, the main source for the CMOS APS is the pixel, along with other signal processing blocks such as row and column decoder, analog signal processor (ASP), analog-to-digital converter (ADC), and timing and control logic circuitry. Therefore, it is important and necessary to characterize noise of the active pixels in CMOS APSs, and we performed experimental measurements and comparisons with theoretical estimations. To derive noise source of the pixels, we designed and fabricated four types of CMOS active pixels, and each pixel is composed of a photodiode and three MOS transistors. The size of these pixels is 100 μm×100 μm. The test chip was fabricated using ETRI 0.8 μm (2P/2M) standard CMOS process. It was found that the dominant noise in CMOS active pixels is shot noise during integration under normal operating conditions. And, it was also seen that epitaxial type pixels have similar noise level compared to non-epitaxial type, and the noise of diffusion type pixel is larger than for a well type pixel on the same substrate type.

  17. Flexible packaging and integration of CMOS IC with elastomeric microfluidics

    NASA Astrophysics Data System (ADS)

    Zhang, Bowei; Dong, Quan; Korman, Can E.; Li, Zhenyu; Zaghloul, Mona E.

    2013-05-01

    We have demonstrated flexible packaging and integration of CMOS IC chips with PDMS microfluidics. Microfluidic channels are used to deliver both liquid samples and liquid metals to the CMOS die. The liquid metals are used to realize electrical interconnects to the CMOS chip. As a demonstration we integrated a CMOS magnetic sensor die and matched PDMS microfluidic channels in a flexible package. The packaged system is fully functional under 3cm bending radius. The flexible integration of CMOS ICs with microfluidics enables previously unavailable flexible CMOS electronic systems with fluidic manipulation capabilities, which hold great potential for wearable health monitoring, point-of-care diagnostics and environmental sensing.

  18. Multiband CMOS sensor simplify FPA design

    NASA Astrophysics Data System (ADS)

    Wang, Weng Lyang B.; Ling, Jer

    2015-10-01

    Push broom multi-band Focal Plane Array (FPA) design needs to consider optics, image sensor, electronic, mechanic as well as thermal. Conventional FPA use two or several CCD device as an image sensor. The CCD image sensor requires several high speed, high voltage and high current clock drivers as well as analog video processors to support their operation. Signal needs to digitize using external sample / hold and digitized circuit. These support circuits are bulky, consume a lot of power, must be shielded and placed in close to the CCD to minimize the introduction of unwanted noise. The CCD also needs to consider how to dissipate power. The end result is a very complicated FPA and hard to make due to more weighs and draws more power requiring complex heat transfer mechanisms. In this paper, we integrate microelectronic technology and multi-layer soft / hard Printed Circuit Board (PCB) technology to design electronic portion. Since its simplicity and integration, the optics, mechanic, structure and thermal design will become very simple. The whole FPA assembly and dis-assembly reduced to a few days. A multi-band CMOS Sensor (dedicated as C468) was used for this design. The CMOS Sensor, allow for the incorporation of clock drivers, timing generators, signal processing and digitization onto the same Integrated Circuit (IC) as the image sensor arrays. This keeps noise to a minimum while providing high functionality at reasonable power levels. The C468 is a first Multiple System-On-Chip (MSOC) IC. This device used our proprietary wafer butting technology and MSOC technology to combine five long sensor arrays into a size of 120 mm x 23.2 mm and 155 mm x 60 mm for chip and package, respectively. The device composed of one Panchromatic (PAN) and four different Multi- Spectral (MS) sensors. Due to its integration on the electronic design, a lot of room is clear for the thermal design. The optical and mechanical design is become very straight forward. The flight model FPA

  19. A quasi-passive CMOS pipeline D/A converter

    NASA Technical Reports Server (NTRS)

    Wang, Fong-Jim; Temes, Gabor C.; Law, Simon

    1989-01-01

    A novel pipeline digital-to-analog converter configuration, based on switched-capacitor techniques, is described. An n-bit D/A conversion can be implemented by cascading n + 1 unit cells. The device count of the circuit increases linearly, not exponentially, with the conversion accuracy. The new configuration can be pipelined. Hence, the conversion rate can be increased without requiring a higher clock rate. An experimental 10-bit DAC prototype has been fabricated using a 3-micron CMOS process. The results show that high-speed, high-accuracy, and low-power operation can be achieved without special process or postprocess trimming.

  20. NSC 800, 8-bit CMOS microprocessor

    NASA Technical Reports Server (NTRS)

    Suszko, S. F.

    1984-01-01

    The NSC 800 is an 8-bit CMOS microprocessor manufactured by National Semiconductor Corp., Santa Clara, California. The 8-bit microprocessor chip with 40-pad pin-terminals has eight address buffers (A8-A15), eight data address -- I/O buffers (AD(sub 0)-AD(sub 7)), six interrupt controls and sixteen timing controls with a chip clock generator and an 8-bit dynamic RAM refresh circuit. The 22 internal registers have the capability of addressing 64K bytes of memory and 256 I/O devices. The chip is fabricated on N-type (100) silicon using self-aligned polysilicon gates and local oxidation process technology. The chip interconnect consists of four levels: Aluminum, Polysi 2, Polysi 1, and P(+) and N(+) diffusions. The four levels, except for contact interface, are isolated by interlevel oxide. The chip is packaged in a 40-pin dual-in-line (DIP), side brazed, hermetically sealed, ceramic package with a metal lid. The operating voltage for the device is 5 V. It is available in three operating temperature ranges: 0 to +70 C, -40 to +85 C, and -55 to +125 C. Two devices were submitted for product evaluation by F. Stott, MTS, JPL Microprocessor Specialist. The devices were pencil-marked and photographed for identification.

  1. Simulation of SEU transients in CMOS ICs

    SciTech Connect

    Kaul, N.; Bhuva, B.L.; Kerns, S.E. )

    1991-12-01

    This paper reports that available analytical models of the number of single-event-induced errors (SEU) in combinational logic systems are not easily applicable to real integrated circuits (ICs). An efficient computer simulation algorithm set, SITA, predicts the vulnerability of data stored in and processed by complex combinational logic circuits to SEU. SITA is described in detail to allow researchers to incorporate it into their error analysis packages. Required simulation algorithms are based on approximate closed-form equations modeling individual device behavior in CMOS logic units. Device-level simulation is used to estimate the probability that ion-device interactions produce erroneous signals capable of propagating to a latch (or n output node), and logic-level simulation to predict the spread of such erroneous, latched information through the IC. Simulation results are compared to those from SPICE for several circuit and logic configurations. SITA results are comparable to this established circuit-level code, and SITA can analyze circuits with state-of-the-art device densities (which SPICE cannot). At all IC complexity levels, SITAS offers several factors of 10 savings in simulation time over SPICE.

  2. A high frame rate, 16 million pixels, radiation hard CMOS sensor

    NASA Astrophysics Data System (ADS)

    Guerrini, N.; Turchetta, R.; Van Hoften, G.; Henderson, R.; McMullan, G.; Faruqi, A. R.

    2011-03-01

    CMOS sensors provide the possibility of designing detectors for a large variety of applications with all the benefits and flexibility of the widely used CMOS process. In this paper we describe a novel CMOS sensor designed for transmission electron microscopy. The overall design consists of a large 61 × 63 mm2 silicon area containing 16 million pixels arranged in a 4K × 4K array, with radiation hard geometry. All this is combined with a very fast readout, the possibility of region of interest (ROI) readout, pixel binning with consequent frame rate increase and a dynamic range close to 12 bits. The high frame rate has been achieved using 32 parallel analogue outputs each one operating at up to 20 MHz. Binning of pixels can be controlled externally and the flexibility of the design allows several possibilities, such as 2 × 2 or 4 × 4 binning. Other binning configurations where the number of rows and the number of columns are not equal, such as 2 × 1 or 2 × 4, are also possible. Having control of the CMOS design allowed us to optimise the pixel design, in particular with regard to its radiation hardness, and to make optimum choices in the design of other regions of the final sensor. An early prototype was also designed with a variety of geometries in order to optimise the readout structure and these are presented. The sensor was manufactured in a 0.35 μm standard CMOS process.

  3. Deposition of titanium dioxide nanoparticles on the membrane of a CMOS-MEMS resonator

    NASA Astrophysics Data System (ADS)

    Ahmed, A. Y.; Dennis, J. O.; Khir, M. H. Md; Saad, M. N. Mohamad

    2014-10-01

    A CMOS-MEMS resonator is optimized as a highly sensitive gas sensor. The principle of detection is based on change in resonant frequency of the resonator due to adsorption/absorption of trace gases onto the active material on the resonator membrane. The resonator was successfully fabricated using 0.35 μm CMOS technology and post-CMOS micromachining process. The post-CMOS process is used to etch the silicon substrate and silicon oxide to release the suspended structures of the devices. Preliminary trials of nanocrystalline Titania paste (TiO2) was screen-printed on three aluminum plates of sizes 2mm × 2 mm. One of the samples was analysed as prepared while the other two samples were sintered at 300°C and 550°C, respectively. Physical observation indicated a change of the color for heated samples as compared to the unheated one. EDX results indicates a carbon (C) peak with average weight % of 18.816 in the as prepared sample and absence of the peaks for the samples sintered at 300°C and 550°C. EDX results also show that the TiO2 used consists of a uniform distribution of spherical shaped nanoparticles with a diameter of about 13.49 to 48.42 nm. Finally, the Titania paste was successfully deposit on the membrane of the CMOS-MEMS resonator for use as the gas sensitive membrane of the sensor.

  4. Dielectrophoretic lab-on-CMOS platform for trapping and manipulation of cells.

    PubMed

    Park, Kyoungchul; Kabiri, Shideh; Sonkusale, Sameer

    2016-02-01

    Trapping and manipulation of cells are essential operations in numerous studies in biology and life sciences. We discuss the realization of a Lab-on-a-Chip platform for dielectrophoretic trapping and repositioning of cells and microorganisms on a complementary metal oxide semiconductor (CMOS) technology, which we define here as Lab-on-CMOS (LoC). The LoC platform is based on dielectrophoresis (DEP) which is the force experienced by any dielectric particle including biological entities in non-uniform AC electrical field. DEP force depends on the permittivity of the cells, its size and shape and also on the permittivity of the medium and therefore it enables selective targeting of cells based on their phenotype. In this paper, we address an important matter that of electrode design for DEP for which we propose a three-dimensional (3D) octapole geometry to create highly confined electric fields for trapping and manipulation of cells. Conventional DEP-based platforms are implemented stand-alone on glass, silicon or polymers connected to external infrastructure for electronics and optics, making it bulky and expensive. In this paper, the use of CMOS as a platform provides a pathway to truly miniaturized lab-on-CMOS or LoC platform, where DEP electrodes are designed using built-in multiple metal layers of the CMOS process for effective trapping of cells, with built-in electronics for in-situ impedance monitoring of the cell position. We present electromagnetic simulation results of DEP force for this unique 3D octapole geometry on CMOS. Experimental results with yeast cells validate the design. These preliminary results indicate the promise of using CMOS technology for truly compact miniaturized lab-on-chip platform for cell biotechnology applications. PMID:26780441

  5. Design and simulation of multi-color infrared CMOS metamaterial absorbers

    NASA Astrophysics Data System (ADS)

    Cheng, Zhengxi; Chen, Yongping; Ma, Bin

    2016-05-01

    Metamaterial electromagnetic wave absorbers, which usually can be fabricated in a low weight thin film structure, have a near unity absorptivity in a special waveband, and therefore have been widely applied from microwave to optical waveband. To increase absorptance of CMOS MEMS devices in 2-5 μmm waveband, multi-color infrared metamaterial absorbers are designed with CSMC 0.5 μmm 2P3M and 0.18 μmm 1P6M CMOS technology in this work. Metal-insulator-metal (MIM) three-layer MMAs and Insulator-metal-insulator-metal (MIMI) four-layer MMAs are formed by CMOS metal interconnect layers and inter metal dielectrics layer. To broaden absorption waveband in 2-5μmm range, MMAs with a combination of different sizes cross bars are designed. The top metal layer is a periodic aluminum square array or cross bar array with width ranging from submicron to several microns. The absorption peak position and intensity of MMAs can be tuned by adjusting the top aluminum micro structure array. Post-CMOS process is adopted to fabricate MMAs. The infrared absorption spectra of MMAs are verified with finite element method simulation, and the effects of top metal structure sizes, patterns, and films thickness are also simulated and intensively discussed. The simulation results show that CMOS MEMS MMAs enhance infrared absorption in 2-20 μmm. The MIM broad MMA has an average absorptance of 0.22 in 2-5 μmm waveband, and 0.76 in 8-14 μm waveband. The CMOS metamaterial absorbers can be inherently integrated in many kinds of MEMS devices fabricated with CMOS technology, such as uncooled bolometers, infrared thermal emitters.

  6. Total-dose and charge-trapping effects in gate oxides for CMOS LSI devices

    SciTech Connect

    Singh, R.S.; Kaputa, D.J.; Korman, C.S.; Surowiec, E.P.

    1984-12-01

    The effect of gamma irradiation on CMOS devices fabricated using 3 Micron CMOS BULK process has been studied as a function of gate oxide processing and subsequent annealing. Threshold shifts, speed degradation, and power supply currents were measured as a function of total dose up to 10/sup 6/ Rad (Si). Using hot electron injection techniques, trapping densities and capture cross-sections of the traps in each oxide type have been determined at pre- and post-irradiation levels. Power supply leakage and speed performance of the devices were recovered within three to five hours by annealing them at 125/sup 0/C, +10 V bias.

  7. Measurements on HV-CMOS active sensors after irradiation to HL-LHC fluences

    NASA Astrophysics Data System (ADS)

    Ristic, B.

    2015-04-01

    During the long shutdown (LS) 3 beginning 2022 the LHC will be upgraded for higher luminosities pushing the limits especially for the inner tracking detectors of the LHC experiments. In order to cope with the increased particle rate and radiation levels the ATLAS Inner Detector will be completely replaced by a purely silicon based one. Novel sensors based on HV-CMOS processes prove to be good candidates in terms of spatial resolution and radiation hardness. In this paper measurements conducted on prototypes built in the AMS H18 HV-CMOS process and irradiated to fluences of up to 2·1016 neq cm-2 are presented.

  8. A novel CMOS sensor with in-pixel auto-zeroed discrimination for charged particle tracking

    NASA Astrophysics Data System (ADS)

    Degerli, Y.; Guilloux, F.; Orsini, F.

    2014-05-01

    With the aim of developing fast and granular Monolithic Active Pixels Sensors (MAPS) as new charged particle tracking detectors for high energy physics experiments, a new rolling shutter binary pixel architecture concept (RSBPix) with in-pixel correlated double sampling, amplification and discrimination is presented. The discriminator features auto-zeroing in order to compensate process-related transistor mismatches. In order to validate the pixel, a first monolithic CMOS sensor prototype, including a pixel array of 96 × 64 pixels, has been designed and fabricated in the Tower-Jazz 0.18 μm CMOS Image Sensor (CIS) process. Results of laboratory tests are presented.

  9. A scalable neural chip with synaptic electronics using CMOS integrated memristors

    NASA Astrophysics Data System (ADS)

    Cruz-Albrecht, Jose M.; Derosier, Timothy; Srinivasa, Narayan

    2013-09-01

    The design and simulation of a scalable neural chip with synaptic electronics using nanoscale memristors fully integrated with complementary metal-oxide-semiconductor (CMOS) is presented. The circuit consists of integrate-and-fire neurons and synapses with spike-timing dependent plasticity (STDP). The synaptic conductance values can be stored in memristors with eight levels, and the topology of connections between neurons is reconfigurable. The circuit has been designed using a 90 nm CMOS process with via connections to on-chip post-processed memristor arrays. The design has about 16 million CMOS transistors and 73 728 integrated memristors. We provide circuit level simulations of the entire chip performing neuronal and synaptic computations that result in biologically realistic functional behavior.

  10. A CMOS-compatible, surface-micromachined pressure sensor for aqueous ultrasonic application

    SciTech Connect

    Eaton, W.P.; Smith, J.H.

    1994-12-31

    A surface micromachined pressure sensor array is under development at the Integrated Micromechanics, Microsensors, and CMOS Technologies organization at Sandia National Laboratories. This array is designed to sense absolute pressures from ambient pressure to 650 psia with frequency responses from DC to 2 MHz. The sensor is based upon a sealed, deformable, circular LPCVD silicon nitride diaphragm. Absolute pressure is determined from diaphragm deflection, which is sensed with low-stress, micromechanical, LPCVD polysilicon piezoresistors. All materials and processes used for sensor fabrication are CMOS compatible, and are part of Sandia`s ongoing effort of CMOS integration with Micro-ElectroMechanical Systems (MEMS). Test results of individual sensors are presented along with process issues involving the release etch and metal step coverage.

  11. Design of a CMOS-based multichannel integrated biosensor chip for bioelectronic interface with neurons.

    PubMed

    Zhang, Xin; Wong, Wai Man; Zhang, Yulong; Zhang, Yandong; Gao, Fei; Nelson, Richard D; Larue, John C

    2009-01-01

    In this paper we present the design and prototyping of a 24-channel mixed signal full-customized CMOS integrated biosensor chip for in vitro extracellular recording of neural signals. Design and implementation of hierarchical modules including microelectrode electrophysiological sensors, analog signal buffers, high gain amplifier and control/interface units are presented in detail. The prototype chip was fabricated by MOSIS with AMI C5 0.5 microm, double poly, triple metal layer CMOS technology. The electroless gold plating process is used to replace the aluminum material obtained from the standard CMOS process with biocompatible metal gold in the planner microelectrode array sensors to prevent cell poisoning and undesirable electrochemical corrosion. The biosensor chip provides a satisfactory signal-to-noise ratio for neural signals with amplitudes and frequencies within the range of 600microV - 2mV and 100 Hz to 10KHz, respectively. PMID:19965239

  12. Adiabatic circuits: converter for static CMOS signals

    NASA Astrophysics Data System (ADS)

    Fischer, J.; Amirante, E.; Bargagli-Stoffi, A.; Schmitt-Landsiedel, D.

    2003-05-01

    Ultra low power applications can take great advantages from adiabatic circuitry. In this technique a multiphase system is used which consists ideally of trapezoidal voltage signals. The input signals to be processed will often come from a function block realized in static CMOS. The static rectangular signals must be converted for the oscillating multiphase system of the adiabatic circuitry. This work shows how to convert the input signals to the proposed pulse form which is synchronized to the appropriate supply voltage. By means of adder structures designed for a 0.13µm technology in a 4-phase system there will be demonstrated, which additional circuits are necessary for the conversion. It must be taken into account whether the data arrive in parallel or serial form. Parallel data are all in one phase and therefore it is advantageous to use an adder structure with a proper input stage, e.g. a Carry Lookahead Adder (CLA). With a serial input stage it is possible to read and to process four signals during one cycle due to the adiabatic 4-phase system. Therefore input signals with a frequency four times higher than the adiabatic clock frequency can be used. This reduces the disadvantage of the slow clock period typical for adiabatic circuits. By means of an 8 bit Ripple Carry Adder (8 bit RCA) the serial reading will be introduced. If the word width is larger than 4 bits the word can be divided in 4 bit words which are processed in parallel. This is the most efficient way to minimize the number of input lines and pads. At the same time a high throughput is achieved.

  13. Label free sensing of creatinine using a 6 GHz CMOS near-field dielectric immunosensor.

    PubMed

    Guha, S; Warsinke, A; Tientcheu, Ch M; Schmalz, K; Meliani, C; Wenger, Ch

    2015-05-01

    In this work we present a CMOS high frequency direct immunosensor operating at 6 GHz (C-band) for label free determination of creatinine. The sensor is fabricated in standard 0.13 μm SiGe:C BiCMOS process. The report also demonstrates the ability to immobilize creatinine molecules on a Si3N4 passivation layer of the standard BiCMOS/CMOS process, therefore, evading any further need of cumbersome post processing of the fabricated sensor chip. The sensor is based on capacitive detection of the amount of non-creatinine bound antibodies binding to an immobilized creatinine layer on the passivated sensor. The chip bound antibody amount in turn corresponds indirectly to the creatinine concentration used in the incubation phase. The determination of creatinine in the concentration range of 0.88-880 μM is successfully demonstrated in this work. A sensitivity of 35 MHz/10 fold increase in creatinine concentration (during incubation) at the centre frequency of 6 GHz is gained by the immunosensor. The results are compared with a standard optical measurement technique and the dynamic range and sensitivity is of the order of the established optical indication technique. The C-band immunosensor chip comprising an area of 0.3 mm(2) reduces the sensing area considerably, therefore, requiring a sample volume as low as 2 μl. The small analyte sample volume and label free approach also reduce the experimental costs in addition to the low fabrication costs offered by the batch fabrication technique of CMOS/BiCMOS process. PMID:25782697

  14. Nanopore-CMOS Interfaces for DNA Sequencing.

    PubMed

    Magierowski, Sebastian; Huang, Yiyun; Wang, Chengjie; Ghafar-Zadeh, Ebrahim

    2016-01-01

    DNA sequencers based on nanopore sensors present an opportunity for a significant break from the template-based incumbents of the last forty years. Key advantages ushered by nanopore technology include a simplified chemistry and the ability to interface to CMOS technology. The latter opportunity offers substantial promise for improvement in sequencing speed, size and cost. This paper reviews existing and emerging means of interfacing nanopores to CMOS technology with an emphasis on massively-arrayed structures. It presents this in the context of incumbent DNA sequencing techniques, reviews and quantifies nanopore characteristics and models and presents CMOS circuit methods for the amplification of low-current nanopore signals in such interfaces. PMID:27509529

  15. Resistor Extends Life Of Battery In Clocked CMOS Circuit

    NASA Technical Reports Server (NTRS)

    Wells, George H., Jr.

    1991-01-01

    Addition of fixed resistor between battery and clocked complementary metal oxide/semiconductor (CMOS) circuit reduces current drawn from battery. Basic idea to minimize current drawn from battery by operating CMOS circuit at lowest possible current consistent with use of simple, fixed off-the-shelf components. Prolongs lives of batteries in such low-power CMOS circuits as watches and calculators.

  16. Low power, CMOS digital autocorrelator spectrometer for spaceborne applications

    NASA Technical Reports Server (NTRS)

    Chandra, Kumar; Wilson, William J.

    1992-01-01

    A 128-channel digital autocorrelator spectrometer using four 32 channel low power CMOS correlator chips was built and tested. The CMOS correlator chip uses a 2-bit multiplication algorithm and a full-custom CMOS VLSI design to achieve low DC power consumption. The digital autocorrelator spectrometer has a 20 MHz band width, and the total DC power requirement is 6 Watts.

  17. High-temperature Complementary Metal Oxide Semiconductors (CMOS)

    NASA Technical Reports Server (NTRS)

    Mcbrayer, J. D.

    1981-01-01

    The results of an investigation into the possibility of using complementary metal oxide semiconductor (CMOS) technology for high temperature electronics are presented. A CMOS test chip was specifically developed as the test bed. This test chip incorporates CMOS transistors that have no gate protection diodes; these diodes are the major cause of leakage in commercial devices.

  18. A high speed CMOS A/D converter

    NASA Technical Reports Server (NTRS)

    Wiseman, Don R.; Whitaker, Sterling R.

    1992-01-01

    This paper presents a high speed analog-to-digital (A/D) converter. The converter is a 7 bit flash converter with one half LSB accuracy. Typical parts will function at approximately 200 MHz. The converter uses a novel comparator circuit that is shown to out perform more traditional comparators, and thus increases the speed of the converter. The comparator is a clocked, precharged circuit that offers very fast operation with a minimal offset voltage (2 mv). The converter was designed using a standard 1 micron digital CMOS process and is 2,244 microns by 3,972 microns.

  19. High total dose effects on CMOS/SOI technology

    SciTech Connect

    Flament, O.; Dupont-Nivet, E.; Leray, J.L.; Pere, J.F.; Delagnes, E. ); Auberton-Herve, A.J.; Giffard, B. ); Borel, G.; Ouisse, T. )

    1992-06-01

    This paper reports that, CMOS silicon on insulator technology has shown its ability to process hardened components which remain functional after irradiation with a total dose of several tens of Megarads. New tests on elementary transistors and 29101 microprocessor have been made at doses up to 100 Mrad (SiO{sub 2}) and above. Results of irradiation at these total doses are presented for different biases, together with the post-irradiation behavior of the components. All the observations show that new parameters must be taken into account for hardness insurance at a high level of total dose.

  20. Silicon nanowires integrated with CMOS circuits for biosensing application

    NASA Astrophysics Data System (ADS)

    Jayakumar, G.; Asadollahi, A.; Hellström, P.-E.; Garidis, K.; Östling, M.

    2014-08-01

    We describe a silicon nanowire (SiNW) biosensor fabricated in a fully depleted SOI CMOS process. The sensor array consists of N by N pixel matrix (N2 pixels or test sites) and 8 input-output (I/O) pins. In each pixel a single crystalline SiNW with 75 by 20 nm cross-section area is defined using sidewall transfer lithography in the SOI layer. The key advantage of the design is that each individual SiNWs can be read-out sequentially and used for real-time charge based detection of molecules in liquids or gases.

  1. Performance Analysis of Visible Light Communication Using CMOS Sensors.

    PubMed

    Do, Trong-Hop; Yoo, Myungsik

    2016-01-01

    This paper elucidates the fundamentals of visible light communication systems that use the rolling shutter mechanism of CMOS sensors. All related information involving different subjects, such as photometry, camera operation, photography and image processing, are studied in tandem to explain the system. Then, the system performance is analyzed with respect to signal quality and data rate. To this end, a measure of signal quality, the signal to interference plus noise ratio (SINR), is formulated. Finally, a simulation is conducted to verify the analysis. PMID:26938535

  2. Performance Analysis of Visible Light Communication Using CMOS Sensors

    PubMed Central

    Do, Trong-Hop; Yoo, Myungsik

    2016-01-01

    This paper elucidates the fundamentals of visible light communication systems that use the rolling shutter mechanism of CMOS sensors. All related information involving different subjects, such as photometry, camera operation, photography and image processing, are studied in tandem to explain the system. Then, the system performance is analyzed with respect to signal quality and data rate. To this end, a measure of signal quality, the signal to interference plus noise ratio (SINR), is formulated. Finally, a simulation is conducted to verify the analysis. PMID:26938535

  3. A CMOS image sensor with stacked photodiodes for lensless observation system of digital enzyme-linked immunosorbent assay

    NASA Astrophysics Data System (ADS)

    Takehara, Hironari; Miyazawa, Kazuya; Noda, Toshihiko; Sasagawa, Kiyotaka; Tokuda, Takashi; Kim, Soo Hyeon; Iino, Ryota; Noji, Hiroyuki; Ohta, Jun

    2014-01-01

    A CMOS image sensor with stacked photodiodes was fabricated using 0.18 µm mixed signal CMOS process technology. Two photodiodes were stacked at the same position of each pixel of the CMOS image sensor. The stacked photodiodes consist of shallow high-concentration N-type layer (N+), P-type well (PW), deep N-type well (DNW), and P-type substrate (P-sub). PW and P-sub were shorted to ground. By monitoring the voltage of N+ and DNW individually, we can observe two monochromatic colors simultaneously without using any color filters. The CMOS image sensor is suitable for fluorescence imaging, especially contact imaging such as a lensless observation system of digital enzyme-linked immunosorbent assay (ELISA). Since the fluorescence increases with time in digital ELISA, it is possible to observe fluorescence accurately by calculating the difference from the initial relation between the pixel values for both photodiodes.

  4. A Glucose Biosensor Using CMOS Potentiostat and Vertically Aligned Carbon Nanofibers.

    PubMed

    Al Mamun, Khandaker A; Islam, Syed K; Hensley, Dale K; McFarlane, Nicole

    2016-08-01

    This paper reports a linear, low power, and compact CMOS based potentiostat for vertically aligned carbon nanofibers (VACNF) based amperometric glucose sensors. The CMOS based potentiostat consists of a single-ended potential control unit, a low noise common gate difference-differential pair transimpedance amplifier and a low power VCO. The potentiostat current measuring unit can detect electrochemical current ranging from 500 nA to 7 [Formula: see text] from the VACNF working electrodes with high degree of linearity. This current corresponds to a range of glucose, which depends on the fiber forest density. The potentiostat consumes 71.7 [Formula: see text] of power from a 1.8 V supply and occupies 0.017 [Formula: see text] of chip area realized in a 0.18 [Formula: see text] standard CMOS process. PMID:27337723

  5. Prototyping of an HV-CMOS demonstrator for the High Luminosity-LHC upgrade

    NASA Astrophysics Data System (ADS)

    Vilella, E.; Benoit, M.; Casanova, R.; Casse, G.; Ferrere, D.; Iacobucci, G.; Peric, I.; Vossebeld, J.

    2016-01-01

    HV-CMOS sensors can offer important advantages in terms of material budget, granularity and cost for large area tracking systems in high energy physics experiments. This article presents the design and simulated results of an HV-CMOS pixel demonstrator for the High Luminosity-LHC. The pixel demonstrator has been designed in the 0.35 μm HV-CMOS process from ams AG and submitted for fabrication through an engineering run. To improve the response of the sensor, different wafers with moderate to high substrate resistivities are used to fabricate the design. The prototype consists of four large analog and standalone matrices with several pixel flavours, which are all compatible for readout with the FE-I4 ASIC. Details about the matrices and the pixel flavours are provided in this article.

  6. Fast-moving target tracking system based on CMOS image sensor

    NASA Astrophysics Data System (ADS)

    Miao, Zhun; Jiang, Jie; Zhang, Guangjun

    2008-10-01

    This paper introduces a fast-moving target tracking system based on CMOS (Complementary Metal-Oxygen Semiconductor) image sensor. A pipeline parallel architecture of region segmentation and first order moment algorithms on FPGA (Field Programmable Gate Array) platform enables driving the high frame rate CMOS image sensor and processing real-time images at the same time, extracting coordinates of the bright target spots in the high-rate consecutive image frames. In the end of this paper, an experiment proved that this system performs well in tracking fast-moving target in satisfying demand of speed and accuracy.

  7. Verilog-A Device Models for Cryogenic Temperature Operation of Bulk Silicon CMOS Devices

    NASA Technical Reports Server (NTRS)

    Akturk, Akin; Potbhare, Siddharth; Goldsman, Neil; Holloway, Michael

    2012-01-01

    Verilog-A based cryogenic bulk CMOS (complementary metal oxide semiconductor) compact models are built for state-of-the-art silicon CMOS processes. These models accurately predict device operation at cryogenic temperatures down to 4 K. The models are compatible with commercial circuit simulators. The models extend the standard BSIM4 [Berkeley Short-channel IGFET (insulated-gate field-effect transistor ) Model] type compact models by re-parameterizing existing equations, as well as adding new equations that capture the physics of device operation at cryogenic temperatures. These models will allow circuit designers to create optimized, reliable, and robust circuits operating at cryogenic temperatures.

  8. Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors

    PubMed Central

    Hsieh, Chen-Hsuan; Dai, Ching-Liang; Yang, Ming-Zhi

    2013-01-01

    This study investigates the design and fabrication of magnetic microsensors using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The magnetic sensor is composed of springs and interdigitated electrodes, and it is actuated by the Lorentz force. The finite element method (FEM) software CoventorWare is adopted to simulate the displacement and capacitance of the magnetic sensor. A post-CMOS process is utilized to release the suspended structure. The post-process uses an anisotropic dry etching to etch the silicon dioxide layer and an isotropic dry etching to remove the silicon substrate. When a magnetic field is applied to the magnetic sensor, it generates a change in capacitance. A sensing circuit is employed to convert the capacitance variation of the sensor into the output voltage. The experimental results show that the output voltage of the magnetic microsensor varies from 0.05 to 1.94 V in the magnetic field range of 5–200 mT. PMID:24172287

  9. Fabrication and characterization of a charge-biased CMOS-MEMS resonant gate field effect transistor

    NASA Astrophysics Data System (ADS)

    Chin, C. H.; Li, C. S.; Li, M. H.; Wang, Y. L.; Li, S. S.

    2014-09-01

    A high-frequency charge-biased CMOS-MEMS resonant gate field effect transistor (RGFET) composed of a metal-oxide composite resonant-gate structure and an FET transducer has been demonstrated utilizing the TSMC 0.35 μm CMOS technology with Q > 1700 and a signal-to-feedthrough ratio greater than 35 dB under a direct two-port measurement configuration. As compared to the conventional capacitive-type MEMS resonators, the proposed CMOS-MEMS RGFET features an inherent transconductance gain (gm) offered by the FET transduction capable of enhancing the motional signal of the resonator and relaxing the impedance mismatch issue to its succeeding electronics or 50 Ω-based test facilities. In this work, we design a clamped-clamped beam resonant-gate structure right above a floating gate FET transducer as a high-Q building block through a maskless post-CMOS process to combine merits from the large capacitive transduction areas of the large-width beam resonator and the high gain of the underneath FET. An analytical model is also provided to simulate the behavior of the charge-biased RGFET; the theoretical prediction is in good agreement with the experimental results. Thanks to the deep-submicrometer gap spacing enabled by the post-CMOS polysilicon release process, the proposed resonator under a purely capacitive transduction already attains motional impedance less than 10 kΩ, a record-low value among CMOS-MEMS capacitive resonators. To go one step further, the motional signal of the proposed RGFET is greatly enhanced through the FET transduction. Such a strong transmission and a sharp phase transition across 0° pave a way for future RGFET-type oscillators in RF and sensor applications. A time-elapsed characterization of the charge leakage rate for the floating gate is also carried out.

  10. Low power SEU immune CMOS memory circuits

    NASA Technical Reports Server (NTRS)

    Liu, M. N.; Whitaker, Sterling

    1992-01-01

    The authors report a design improvement for CMOS static memory circuits hardened against single event upset (SEU) using a recently proposed logic/circuit design technique. This improvement drastically reduces static power consumption, reduces the number of transistors required in a D flip-flop design, and eliminates the possibility of capturing an upset state in the slave section during a clock transition.