Sample records for pumped krf excimer

  1. 10 x 10 cm-sq aperture 1 Hz repetition rate X-ray preionized-discharge pumped KrF excimer laser

    NASA Astrophysics Data System (ADS)

    Mizoguchi, H.; Endoh, A.; Jethwa, J.; Schaefer, F. P.

    A 10 x 10 sq cm aperture X-ray preionized discharge-pumped KrF excimer amplifier for subpicosecond pulse amplification is demonstrated experimentally in the oscillator mode operation. A fast pulse-forming line (36 nF, 340 kV) together with a peaking capacitor (6 nF) switched with a rail-gap switch, and collimated X-ray preionization is employed to obtain a wide and uniform discharge. The active cross section of the laser beam is about 10 x 8 sq cm and the intense plateau region is about 10 x 5.5 sq cm. The laser pulse energy exceeds 4.7 J in a 28 ns pulse (FWHM).

  2. Boron trichloride purification with a KrF excimer laser

    SciTech Connect

    Hyer, R.C.; Hartford, A. Jr.; Atencio, J.H.


    Selective ultraviolet photolysis using a KrF excimer laser has been used to substantially reduce the phosgene impurity in a binary mixture of boron trichloride and phosgene. Infrared spectroscopic analysis of the sample before and after irradiation shows that it is possible to highly purify commercially available boron trichloride with this technique.

  3. Research of the quenched dye lasers pumped by excimer lasers

    SciTech Connect

    Xue Shaolin; Lou Qihong


    In this paper, the quenched dye lasers pumped by XeCl and KrF excimer lasers were investigated theoretically and experimentally. Dye laser pulses with duration of 0.8 ns for XeCl laser pumping and 2 ns for KrF laser pumping were obtained. The dye Rhodamine 6G dissolved in methyl was used as the active medium in the quenched dye laser. When the pump laser was KrF and the active medium was Coumarin 498 the quenched dye laser emitted pulse with duration of about 2 ns. The characteristics of the quenched dye laser was also investigated in detail.

  4. Progress in discharge-pumped excimer lasers

    NASA Astrophysics Data System (ADS)

    Pike, Charles T.


    This paper describes recent results achieved in the development of discharge pumped excimer lasers at the Textron Defense Systems organization (formerly the Avco Research Laboratory). Included is a description of a KrF laser with more than one Joule output at 2.4% efficiency, a 200 mJ XeCl laser operating with a 500 nsec wide pulse, and a several Joule, discharge pumped, KrCl laser operating at 222 nm. All of these devices are switched using thyratrons and are therefore capable of repetitive performance. The KrF and XeCl experiments were conducted with the same laser device operating with a conventional capacitor transfer excitation circuit for the KrF experiments but modified to operate with a pulser-sustainer discharge circuit using magnetic switching for the XeCl tests. The KrCl device is a 40 liter volume system built by Northrop and also operates with a magnetically switched discharge.

  5. KrF excimer laser precision machining of hard and brittle ceramic biomaterials.


    Huang, Yao-Xiong; Lu, Jian-Yi; Huang, Jin-Xia


    KrF excimer laser precision machining of porous hard-brittle ceramic biomaterials was studied to find a suitable way of machining the materials into various desired shapes and sizes without distorting their intrinsic structure and porosity. Calcium phosphate glass ceramics (CPGs) and hydroxyapatite (HA) were chosen for the study. It was found that KrF excimer laser can cut both CPGs and HA with high efficiency and precision. The ablation rates of CPGs and HA are respectively 0.081 µm/(pulse J cm(-2)) and 0.048 µm/(pulse  J cm(-2)), while their threshold fluences are individually 0.72 and 1.5 J cm(-2). The cutting quality (smoothness of the cut surface) is a function of laser repetition rate and cutting speed. The higher the repetition rate and lower the cutting speed, the better the cutting quality. A comparison between the cross sections of CPGs and HA cut using the excimer laser and using a conventional diamond cutting blade indicates that those cut by the excimer laser could retain their intrinsic porosity and geometry without distortion. In contrast, those cut by conventional machining had distorted geometry and most of their surface porosities were lost. Therefore, when cutting hard-brittle ceramic biomaterials to prepare scaffold and implant or when sectioning them for porosity evaluation, it is better to choose KrF excimer laser machining. PMID:24784833

  6. Picosecond VUV anti-Stokes Raman laser pumped by a KrF laser

    NASA Astrophysics Data System (ADS)

    Takahashi, Akihiko; Maeda, Mitsuo; Muraoka, Katsunori; Akazaki, Masanori


    Generation of picosecond vacuum ultraviolet pulses by anti-Stokes stimulated Raman Scattering (ASRS) in hydrogen gas is reported. A tunable picosecond KrF excimer laser (30 ps FWHM, 12 mJ) is used as a pump source, and a series of anti-Stokes lines up to the 9th order (128.8 nm) is efficiently generated. The transient effects due to the finite decay time of the Raman medium are discussed for the present picosecond ASRS experiment.

  7. Practical resolution enhancement effect by new complete antireflective layer in KrF excimer laser lithography

    NASA Astrophysics Data System (ADS)

    Ogawa, Tohru; Kimura, Mitsumori; Gocho, Tetsuo; Tomo, Yoichi; Tsumori, Toshiro


    A new complete anti-reflective layer (ARL) for KrF excimer laser lithography, which becomes an excimer laser lithography to a practical mass production tool beyond 0.35 micrometers rule devices, is developed. This new ARL, whose material is a type of hydro silicon oxynitride film (SiOxNy:H), can be applied to tungsten silicide (W-Si) and even to aluminum silicon (Al- Si) substrates by controlling deposition conditions in plasma enhanced chemical vapor deposition systems. Using this SiOxNy:H film with 30 nm and 25 nm thicknesses on W-Si and Al-Si substrates respectively, critical dimension variations for both substrates are drastically reduced to within 0.02 micrometers for 0.30 micrometers imaging. On actual device structures, with these SiOxNy:H film as an ARL, notching effects by halation are completely reduced. Moreover, these SiOxNy:H film can not only be deposited with topographical uniformity but also etched with conventional SiO2 etching conditions. Another advantage with ARL is a depth of focus enhancement effect. With a SiOxNy:H film depth of focus for the critical dimension is enlarged more than 23% for 0.35 micrometers line and space patterns. Accordingly, practical resolution is enhanced. From the above effect, the limitations of KrF excimer laser lithography for ideal substrate conditions are considered from the point of view of optimal projection lens NA for various feature sizes.

  8. Spectrally narrowed lasing of a self-injection KrF excimer laser

    NASA Astrophysics Data System (ADS)

    Shimada, Yasuhiro; Wani, Koichi; Miki, Tadaaki; Kawahara, Hidehito; Mimasu, Mutsumi; Ogata, Yoshiro


    Spectrally nantwed lasing of a KrF excimer laser has teen ahieved by a self-injection technique using abeam splitter for power extraction aixi intravity etalons for spectral-narrowing. The laser cavity is divithi into an amplifying branch aix! a spectralnarrowing branch. The spectral bandwidth was narrowed to <3pm FWHM with air-sed etalons placed in the spectral-narrowing branch. A laser propagation model was intrOdUced for describing the laser intensity traveling in the laser cavity. The calculated intensityincident onthe intracavityetalons wassmaller thanthat in theconventional Fabry-Perotcavity withplane-parallel mirrors.

  9. Sub-500-nm patterning of glass by nanosecond KrF excimer laser ablation

    NASA Astrophysics Data System (ADS)

    Bekesi, J.; Meinertz, J.; Simon, P.; Ihlemann, J.


    The surface of flint glass of type F2 is patterned by nanosecond KrF excimer laser ablation. Strong UV absorption provides a comparatively low ablation threshold and precise ablation contours. By using a two-grating interferometer, periodic surface patterns with 330 nm period and 100 nm modulation depth are obtained. This method enables the fabrication of 7 mm×13 mm wide grating areas with perfectly aligned grooves without the need of high-precision sample positioning. By double exposure, crossed gratings with adjustable depths in the two orthogonal directions can be generated.

  10. Comparison of KrF and ArF excimer laser treatment of biopolymer surface

    NASA Astrophysics Data System (ADS)

    Michaljaničová, I.; Slepička, P.; Heitz, J.; Barb, R. A.; Sajdl, P.; Švorčík, V.


    The goal of this work was the investigation of the impact of two different excimer lasers on two biocompatible and biodegradable polymers (poly-L-lactide and poly hydroxybutyrate). Both polymers find usage in medical and pharmaceutical fields. The polymers were modified by KrF and ArF excimer lasers. Subsequently the impact on surface morphology, surface chemistry changes, and thermal properties was studied by means of confocal and AFM microscopy, FTIR and XPS spectroscopy and DSC calorimetry. Under the same conditions of laser treatment it was observed that ArF laser causes more significant changes on surface chemistry, surface morphology and pattern formation on the polymers under investigation. The data obtained in this work can be used for a wide range of possible applications, in tissue engineering or in combination with metallization in electronics, e.g. for biosensors.

  11. Raman scattering measurements in flames using a tunable KrF excimer laser.


    Wehrmeyer, J A; Cheng, T S; Pitz, R W


    Using a narrow-band tunable KrF excimer laser as a spontaneous vibrational Raman scattering source, we demonstrate that single-pulse concentration and temperature measurements, with only minimal fluorescence interference, are possible for all major species (O(2), N(2), H(2)O, and H(2)) at all stoichiometries (fuel-lean to fuel-rich) of H(2)-air flames. Photon-statistics-limited precisions in these instantaneous and spatially resolved single-pulse measurements are typically 5%, which are based on the relative standard deviations of single-pulse probability distributions. Optimal tuning of the narrow-band KrF excimer laser (248.623 nm) for the minimization of OH A(2)Sigma-X(2)II and O(2)B(3)Sigma(u)(-)-X(3)Sigma(g)(-) fluorescence interference is determined from fluorescence excitation spectra. In addition to the single-pulse N(2) Stokes/anti-Stokes ratio temperature measurement technique, a time-averaged temperature measurement technique ispresented that matches the N(2) Stokes Raman spectrum to theoretical spectra by using a single intermediate sta frequency to account for near-resonance enhancement. Raman flame spectra in CH(4)-air flames are presented that have good signal-to-noise characteristics and show promise for single-pulse UV Raman measurements in hydrocarbon flames. PMID:20720783

  12. Observation of atmospheric ozone by dial with Raman lasers pumped by a KrF laser

    NASA Technical Reports Server (NTRS)

    Maeda, M.; Shibata, T.


    Since the XeCl excimer laser (308 nm) was first used in Differential Absorption Lidar (DIAL) for stratospheric ozone detection, the XeCl ozone lidar became a useful tool for the monitoring of the stratospheric ozone concentration. Shorter wavelength lasers are needed for the observation of ozone in the troposphere where the ozone concentration is about one order of magnitude smaller than in the stratosphere. In 1983, tropospheric ozone was observed with the combination of the second Stokes line (290.4 nm) of stimulated Raman scattering from methane pumped by a KrF laser and the XeCl laser line. The measurement of the ozone distribution from ground to 30 km was reported, using three Stokes lines of Raman lasers pumped by a KrF laser. At wavelengths shorter than 295 nm, the background solar radiation is effectively suppressed by atmospheric ozone. Such a solar-blind effect can be expected when two wavelengths 277 and 290.4 nm are used for DIAL ozone detection. A preliminary measurement of the day time ozone distribution in the troposphere is presented using these wavelengths generated by a KrF laser with a Raman shifter. Analysis using the lidar equation predicts the maximum detectable range is 7 km.

  13. High-power gas-discharge excimer ArF, KrCl, KrF and XeCl lasers utilising two-component gas mixtures without a buffer gas

    NASA Astrophysics Data System (ADS)

    Razhev, A. M.; Kargapol'tsev, E. S.; Churkin, D. S.


    Results of an experimental study of the influence of a gas mixture (laser active medium) composition on an output energy and total efficiency of gas-discharge excimer lasers on ArF* (193 nm), KrCl* (222 nm), KrF* (248 nm) and XeCl* (308 nm) molecules operating without a buffer gas are presented. The optimal ratios of gas components (from the viewpoint of a maximum output energy) of an active medium are found, which provide an efficient operation of laser sources. It is experimentally confirmed that for gas-discharge excimer lasers on halogenides of inert gases the presence of a buffer gas in an active medium is not a necessary condition for efficient operation. For the first time, in two-component gas mixtures of repetitively pulsed gas-discharge excimer lasers on electron transitions of excimer molecules ArF*, KrCl*, KrF* and XeCl*, the pulsed energy of laser radiation obtained under pumping by a transverse volume electric discharge in a low-pressure gas mixture without a buffer gas reached up to 170 mJ and a high pulsed output power (of up to 24 MW) was obtained at a FWHM duration of the KrF-laser pulse of 7 ns. The maximal total efficiency obtained in the experiment with two-component gas mixtures of KrF and XeCl lasers was 0.8%.

  14. KrF excimer laser lithography with a phase-shifting mask for gigabit-scale ultra large scale integration

    NASA Astrophysics Data System (ADS)

    Imai, Akira; Terasawa, Tsuneo; Hasegawa, Norio; Asai, Naoko; Tanaka, Toshihiko P.; Okazaki, Shinji


    Resolution-enhancement technologies such as alternating-type phase-shifting masks (PSMs), half-tone PSMs, and the off- axis illumination method in optical lithography are necessary for manufacturing gigabit-scale ultra large scale integration (ULSI) devices. Because an alternating-type PSM is the most effective way to enhance resolution, we examine the resolution capabilities of KrF excimer laser lithography combined with the use of an alternating-type PSM through simulations. Our goal is to apply this technique to attain pattern delineation smaller than 200 nm. We simulate light intensity profiles for various types of PSMs in terms of the 3-D mask structure, and find that a PSM structure with a spin-on glass (SOG) phase shifter on a Cr layer that is thinner than in a conventional mask is one of the best choices for KrF excimer laser lithography. We examine potential problems such as the durability of the SOG phase shifters to KrF excimer laser irradiation exposure, and phase angle error due to the surface topography of the Cr aperture patterns. From our experimental results, we confirm that the optical characteristics of the PSM are not degraded, and the phase angle can be controlled with an accuracy sufficient for gigabit-scale ULSI device fabrication. Improved PSMs with a thin Cr layer and SOG phase shifters were successfully used to fabricate several layers of experimental 1-Gbit dynamic random access memory (DRAM) devices with sufficient resolution capability.

  15. Rapid discharge-pumped wide aperture X-ray preionized KrF laser

    NASA Astrophysics Data System (ADS)

    Mizoguchi, H.; Endoh, A.; Jethwa, J.; Rácz, B.; Schäfer, F. P.


    A wide aperture X-ray preionized discharge-pumped KrF excimer laser has been constructed. A flat plate pulse-forming line (36 nF, 340 kV) charges a peaking capacitor (6 nF) through a rail-gap to facilitate a rapid discharge in the laser head. Collimated X-ray preionization is employed to obtain a wide and uniform discharge. The laser is intended to be used as a short pulse amplifier and results are presented when characterized as an oscillator. The active cross-section of the laser beam is 10×8 cm2 with 50 cm effective electrode length. The laser pulse energy exceeds 4.7 J in a 28 ns pulse (FWHM).

  16. Raman scattering measurements in flames using a tunable KrF excimer laser

    NASA Technical Reports Server (NTRS)

    Wehrmeyer, Joseph A.; Cheng, Tsarng-Sheng; Pitz, Robert W.


    A narrow-band tunable KrF excimer laser is used as a spontaneous vibrational Raman scattering source to demonstrate that single-pulse concentration and temperature measurements, with only minimal fluorescence interference, are possible for all major species (O2, N2, H2O, and H2) at all stoichiometries (fuel-lean to fuel rich) of H2-air flames. Photon-statistics-limited precisions in these instantaneous and spatially resolved single-pulse measurements are typically 5 percent, which are based on the relative standard deviations of single-pulse probability distributions. In addition to the single-pulse N2 Stokes/anti-Stokes ratio temperature measurement technique, a time-averaged temperature measurement technique is presented that matches the N2 Stokes Raman spectrum to theoretical spectra by using a single intermediate state frequency to account for near-resonance enhancement. Raman flame spectra in CH4-air flames are presented that have good signal-to-noise characteristics and show promise for single-pulse UV Raman measurements in hydrocarbon flames.

  17. Analysis of damage threshold of K9 glass irradiated by 248-nm KrF excimer laser

    NASA Astrophysics Data System (ADS)

    Wang, Xi; Shao, Jingzhen; Li, Hua; Nie, Jinsong; Fang, Xiaodong


    The theoretical model of K9 glass irradiated by a 248-nm KrF excimer laser was established, and a numerical simulation was performed to calculate temperature and thermal stress fields in the K9 glass sample using the finite element method. The laser-induced damage thresholds were defined and calculated, and the effect of repetition frequency and the number of pulses on the damage threshold were also studied. Furthermore, the experiment research was carried out to confirm the numerical simulation. The damage threshold and damage morphology were analyzed by means of a metallurgical microscope and scanning electron microscopy. The simulation and experimental results indicated that the damage mechanism of K9 glass irradiated by a KrF excimer laser was melting damage and stress damage, and the stress damage first appeared inside the K9 glass sample. The tensile stress damage threshold, the compressive stress damage threshold, and the melting damage threshold were 0.64, 0.76, and 1.05 J/cm2, respectively. The damage threshold decreased with increasing repetition frequency and number of laser pulses. The experimental results indicated that the damage threshold of K9 glass was 2.8 J/cm2.

  18. Preparation of Ultrafine Fe–Pt Alloy and Au Nanoparticle Colloids by KrF Excimer Laser Solution Photolysis

    PubMed Central


    We prepared ultrafine Fe–Pt alloy nanoparticle colloids by UV laser solution photolysis (KrF excimer laser of 248 nm wavelength) using precursors of methanol solutions into which iron and platinum complexes were dissolved together with PVP dispersant to prevent aggregations. From TEM observations, the Fe–Pt nanoparticles were found to be composed of disordered FCC A1 phase with average diameters of 0.5–3 nm regardless of the preparation conditions. Higher iron compositions of nanoparticles require irradiations of higher laser pulse energies typically more than 350 mJ, which is considered to be due to the difficulty in dissociation of Fe(III) acetylacetonate compared with Pt(II) acetylacetonate. Au colloid preparation by the same method was also attempted, resulting in Au nanoparticle colloids with over 10 times larger diameters than the Fe–Pt nanoparticles and UV–visible absorption peaks around 530 nm that originate from the surface plasmon resonance. Differences between the Fe–Pt and Au nanoparticles prepared by the KrF excimer laser solution photolysis are also discussed. PMID:20596425

  19. Formation of a narrow beam from an excimer laser pumped by gamma rays

    SciTech Connect

    Lazhintsev, B V; Nor-Arevyan, V A


    A laser pumped by a travelling gamma-radiation wave and consisting of a cylindrical part forming spontaneous superradiation and a conical amplifier is considered. The energy parameters of an excimer conical KrF amplifier are investigated. The factors influencing the divergence of induced radiation at the output of the conical amplifier are analysed for various durations of a pump pulse. It is shown that the divergence of radiation emitted by the laser with an active medium length of 10 m may be as high as 10{sup -4} rad. The scheme of laser-beam focusing on the target for the purposes of laser-induced fusion is considered. (control of laser radiation parameters)

  20. Single pulse vibrational Raman scattering by a broadband KrF excimer laser in a hydrogen-air flame.


    Pitz, R W; Wehrmeyer, J A; Bowling, J M; Cheng, T S


    Spontaneous vibrational Raman scattering (VRS) is produced by a broadband excimer laser at 248 nm (KrF) in a H(2)-air flame and VRS spectra are recorded for lean, stoichiometric, and rich flames. Except at very lean flame conditions, laser-induced fluorescence (LIF) processes interfere with VRS Stokes lines from H(2), H(2)O, and O(2). No interference is found for the N(2) Stokes and N(2) anti-Stokes lines. In a stoichiometric H(2)/air flame, single-pulse measurements of N(2) concentration and temperature (by the VRS Stokes to anti-Stokes ratio) have relative standard deviation of 7.7 and 10%, respectively. These single pulse measurement errors compare well with photon statistics calculations using measured Raman cross sections. PMID:20563170

  1. Molecular design and synthesis of 3-oxocyclohexyl methacrylate for ArF and KrF excimer laser resist

    SciTech Connect

    Kozaki, Koji; Kaimoto, Yuko; Takahashi, Makoto


    The authors originally designed 3-oxocyclohexyl methacrylate (OCMA) for an acid-labile component in chemical amplification. The key concept of the molecular design of the 3-oxocyclohexyl substituent was the introduction of acidic protons at the {alpha}-position of the elimination site by using a ketone functional group. OCMA was synthesized by esterification of 1,3-cyclohexanediol and methacryloyl chloride followed by pyridinium dichromate oxidation. Using AIBN as an initiator, the authors also prepared poly(OCMA-co-AdMA) (AdMA: adamantyl methacrylate) by a thermally induced radical copolymerization of OCMA and AdMA. The resist comprises the copolymer and 10 wt % of triphenylsulfonium hexafluoroantimonate as a photoacid generator (PAG). This resist has high sensitivity, good thermal stability, good dry etch resistance, and good postexposure delay durability. Using a KrF excimer laser stepper (NA = 0.45) and 2-propanol mixed aqueous alkali developer, the authors obtained 0.3-{mu}m line and space patterns with this resist. A resist with 1 wt % of the PAG has an acceptable transmittance at 193 nm, proving that this resist is suitable for ArF excimer lithography. 29 refs., 10 figs., 2 tabs.

  2. High-NA high-throughput scanner compatible 2-kHz KrF excimer laser for DUV lithography

    NASA Astrophysics Data System (ADS)

    Nakarai, Hiroaki; Hisanaga, Naoto; Suzuki, Natsushi; Matsunaga, Takeshi; Asayama, Takeshi; Akita, Jun; Igarashi, Toru; Ariga, Tatsuya; Bushida, Satoru; Enami, Tatsuo; Nodomi, Ryoichi; Takabayashi, Yuichi; Sakanishi, Syouich; Suzuki, Takashi; Tomaru, Hitoshi; Nakao, Kiyoharu


    We have succeeded in the development of an excimer laser with ultra narrow bandwidth applicable to high N.A. scanners targeting on the 0.13micrometers -design rule. Key word of our solution for 0.13micrometers -design rule was 'extended technologies of currently available KrF excimer laser unit. As the result we could shorten development time remarkably. The narrower the laser spectrum, the less the influence of chromatic aberration on exposure projection lens; this is a well-known fact. We have developed the technologies to achieve spectral bandwidths less than 0.5pm, 20 percent narrower than our current model G20K. In order to attain this number, the major design change was made on line narrowing module, which was redesigned to minimize the dispersion of wavelength element. In addition gas condition was fine-tuned for the new line narrowing module. Integrated energy stability has been improved within +/- 0.35 percent with 35 pulses window by the introduction of a high efficiency pules power module and a faster gas circulation system. The rest of oscillation performances and durability equate with the base model G20K. The intelligent gas control system extended gas exchange interval up to 200 million pulses or 7 days. The G20K already passed through 10 billion-pulse test. Total energy loss was within 4mJ which is small enough to be compensated by gas injection and voltage change; it is a unique compensation system of Komatsu.

  3. Development of a Silicon Based Electron Beam Transmission Window for Use in a KrF Excimer Laser System

    SciTech Connect

    C.A. Gentile; H.M. Fan; J.W. Hartfield; R.J. Hawryluk; F. Hegeler; P.J. Heitzenroeder; C.H. Jun; L.P. Ku; P.H. LaMarche; M.C. Myers; J.J. Parker; R.F. Parsells; M. Payen; S. Raftopoulos; J.D. Sethian


    The Princeton Plasma Physics Laboratory (PPPL), in collaboration with the Naval Research Laboratory (NRL), is currently investigating various novel materials (single crystal silicon, <100>, <110> and <111>) for use as electron-beam transmission windows in a KrF excimer laser system. The primary function of the window is to isolate the active medium (excimer gas) from the excitation mechanism (field-emission diodes). Chosen window geometry must accommodate electron energy transfer greater than 80% (750 keV), while maintaining structural integrity during mechanical load (1.3 to 2.0 atm base pressure differential, approximate 0.5 atm cyclic pressure amplitude, 5 Hz repetition rate) and thermal load across the entire hibachi area (approximate 0.9 W {center_dot} cm superscript ''-2''). In addition, the window must be chemically resistant to attack by fluorine free-radicals (hydrofluoric acid, secondary). In accordance with these structural, functional, and operational parameters, a 22.4 mm square silicon prototype window, coated with 500 nm thin-film silicon nitride (Si{sub 3}N{sub 4}), has been fabricated. The window consists of 81 square panes with a thickness of 0.019 mm {+-} 0.001 mm. Stiffened (orthogonal) sections are 0.065 mm in width and 0.500 mm thick (approximate). Appended drawing (Figure 1) depicts the window configuration. Assessment of silicon (and silicon nitride) material properties and CAD modeling and analysis of the window design suggest that silicon may be a viable solution to inherent parameters and constraints.

  4. Surface studies on benzophenone doped PDMS microstructures fabricated using KrF excimer laser direct write lithography

    NASA Astrophysics Data System (ADS)

    Kant, Madhushree Bute; Shinde, Shashikant D.; Bodas, Dhananjay; Patil, K. R.; Sathe, V. G.; Adhi, K. P.; Gosavi, S. W.


    This paper discusses microfabrication process for benzophenone doped polydimethylsiloxane (PDMS) using laser lithography. KrF excimer laser of 248 nm with 20 ns pulse width at repetition rate of 1 Hz was used for microfabrication of undoped and benzophenone doped PDMS. The doped-PDMS shows sensitivity below 365 nm, permitting processing under ambient light. The analysis of etch depth revealed that doped PDMS shows self developable sensitivity at lower fluence of ∼250 mJ/cm2. The unexposed and exposed surface was studied using Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS), Raman spectroscopy and Scanning electron microscopy (SEM). Spectrocopic analysis indicated increase in Csbnd O, Cdbnd O, Sisbnd O3 and Sisbnd O4 bonding at the expense of Sisbnd C and Sisbnd O2 bonds of PDMS. In case of laser exposed doped-PDMS, removal of benzophenone from probe depth of spectroscopy was observed. Whereas the surface morphology of exposed and unexposed doped-PDMS was observed to be same, indicating clean development of PDMS micropatterns. The present study indicates that addition of 3.0 wt.% benzophenone in PDMS enhance self development sensitivity of PDMS. The self developable results on doped-PDMS are quite encouraging for its potential use in point of care Lab-On-Chip applications, for fabricating micropatterns using direct write laser lithography technology.

  5. Neutron-pumped excimer flashlamp sources

    NASA Astrophysics Data System (ADS)

    Miley, George H.; Prelas, Mark A.


    A Nuclear Pumped Flashlamp (NPF) is closely related to a Nuclear-Pumped Laser NPL in that both use nuclear radiation to excite the medium. The NPF does not require as high peak power as is needed for NPL inversion. Still, with a reactor source, a large volume NPF can be designed to deliver extremely large fluorescence in the UV up to the infrared range, depending on the media employed. The NPF can then be used for industrial applications or for pumping a laser requiring a high intensity light pump. The first experimental example of this approach was a 3He-XeBr2 NPF employed in 1993 to pump a small iodine laser. The present paper discusses issues involved in scaling such a NPF up to an ultra high energy output.

  6. KrF- and ArF-excimer-laser-induced absorption in silica glasses produced by melting synthetic silica powder

    SciTech Connect

    Kuzuu, Nobu; Sasaki, Toshiya; Kojima, Tatsuya; Tanaka, Jun-ichiro; Nakamura, Takayuki; Horikoshi, Hideharu


    KrF- and ArF-excimer-laser-induced absorption of silica glasses produced by electric melting and flame fusion of synthetic silica powder were investigated. The growth of KrF-laser-induced absorption was more gradual than that of ArF-laser-induced absorption. Induced absorption spectra exhibited a peak at about 5.8 eV, of which the position and width differed slightly among samples and laser species. Widths of ArF-laser-induced absorption spectra were wider than those of KrF-laser-induced spectra. KrF-laser-induced absorption is reproducible by two Gaussian absorption bands peaking at 5.80 eV with full width at half maximum (FWHM) of 0.62 eV and at 6.50 eV with FWHM of 0.74 eV. For reproduction of ArF-laser-induced absorption, Gaussian bands at 5.41 eV with FWHM of 0.62 eV was necessary in addition to components used for reproducing KrF-laser-induced absorption. Based on the discussion of the change of defect structures evaluated from change of absorption components, we proposed that the precursor of the 5.8-eV band ascribed to E Prime center ({identical_to}Si{center_dot}) is {identical_to}Si-H HO-Si{identical_to} structures formed by the reaction between strained Si-O-Si bonds and interstitial H{sub 2} molecules during the irradiation.

  7. Formation of laser irradiation by non-uniform pumping discharge of KrF laser

    NASA Astrophysics Data System (ADS)

    Bychkov, Yurii I.; Panchenko, Yurii N.; Yampolskaya, Sofiya A.; Yastremskii, Arcadii G.


    Results of 2D simulation of a KrF laser are presented. In the model, inhomogeneities of distributions of the electric field and plasma particle concentration are considered. It is demonstrated, that the laser energy depends not only on the value of the total pump power, but also from its spatial distribution. The shape of the electrodes is a major determinant of the spatial distribution of pumping power in the active medium. For electrodes with small radii of curvature, the pumping power in the center of the discharge may be too high. This leads to the suppression of radiation in the center of the discharge and the limitation of the laser energy.

  8. Species-resolved laser-probing investigations of the hydrodynamics of KrF excimer and copper vapor laser ablation processing of materials

    NASA Astrophysics Data System (ADS)

    Ventzek, Peter L. G.; Gilgenbach, Ronald M.; Ching, Chi H.; Lindley, R. A.


    Hydrodynamic phenomena from KrF excimer laser ablation (10-3-20 J/cm2) of polyimide, polyethyleneterephthalate, and aluminum are diagnosed by laser beam deflection, schlieren photography, shadowgraphy, laser-induced-fluorescence and dye-laser- resonance absorption photography (DLRAP). Experiments were performed in vacuum and gaseous environments (10-5 to 760 Torr). In vacuum, the DLRAP diagnostic shows species-resolved plume expansion which is consistent with that of a reflected rarefaction wave. Increasing the background gas pressure reveals the formation of sound/shock compared to CN in the laser-ablated polyimide (Vespel) plume/shock in inert (e.g. argon) and reactive (e.g. air) gases. At low pressures (less than 10 Torr) Al and CN species are in close contact with the shock front. As the pressure increases, the species front tends to recede, until at high pressures (over 200 Torr) the species are restrained to only a few mm above the target surface. After sufficient expansion, Al and CN are no longer detectable; only the shadowgraph of the hot gas plume remains. Since CN is observable in both inert and reactive environments, it can be concluded that CN is not a reaction product between the background gas and the ablated species. By way of comparison to excimer laser ablation processing of materials, copper vapor laser machined polyimide and polymethylmethacrylate (transparent to green and yellow copper vapor laser light) are also investigated. The two polymers are observed to have markedly different machined surfaces. Hydrodynamic effects for the copper vapor laser machined materials are investigated using HeNe laser beam deflection.

  9. Periodic structure with a periodicity of 2-3.5 μm on crystalline TiO2 induced by unpolarized KrF excimer lasers

    NASA Astrophysics Data System (ADS)

    He, Rong; Ma, Hongliang; Zheng, Jiahui; Han, Yongmei; Lu, Yuming; Cai, Chuanbing


    Laser-induced periodic surface structures (LIPSS) were processed on the TiO2 bulk surface under the irradiation of 248 nm unpolarized KrF excimer laser pulses in air. Spatial LIPSS periods ranging from 2 to 3.5 μm are ascribed to the capillary wave. These microstructures were analyzed at different laser pulse numbers with the laser energy from 192 to 164 mJ. The scanning electron microscopy results indicated eventually stripes that have been disrupted as the increase in the laser pulse numbers, which is reasonably explained by the energy accumulating effect. In addition, investigations were concentrated on the surface modifications at pre-focal plane, focal plane and post-focal plane in the same defocusing amount. Compared with condition at pre-focal plane, in addition to the plasma produced at target, the air was also breakdown for the situation of post-focal plane. So it was reasonable that stripes appeared at pre-focal plane but not at post-focal plane.

  10. Synthesis of diamond on WC-Co substrates using a KrF excimer laser in combination with a combustion flame

    NASA Astrophysics Data System (ADS)

    Han, Y. X.; Ling, H.; Lu, Y. F.


    A KrF excimer laser was used in combination with a combustion flame to deposit diamond films on cemented tungsten carbide (WC-Co) substrates. The laser has a wavelength of 248 nm, a pulse width of 23 ns, a pulse energy range of 84~450 mJ, and a repetition rate up to 50 Hz. Using the combustion flame method, diamond films were deposited on the laser-processed WC-Co substrates for 10 min. The morphologies of the deposited diamond films were examined using a scanning electron microscopy (SEM). The composition and bonding structures in the deposited films were studied by energy dispersive X-ray analysis (EDX) and Raman spectroscopy, respectively. The film adhesion was characterized by scratching a razor across the films. It was found that C composition on WC-Co substrate surfaces was eliminated by the laser irradiation. As a consequence, diamond nucleation density decreased and diamond grains grew larger in the laser-processed areas. Based on the experimental results, a film growth mechanism at different deposition temperature ranges corresponding to pre-deposition laser-surface-treatment effects was proposed.

  11. Theoretical Modeling of the Discharge-Pumped Xenon - Excimer Laser.

    NASA Astrophysics Data System (ADS)

    Zhu, Sheng-Bai

    The present dissertation is dedicated to a theoretical study of the discharge pumped XeCl excimer laser. For a better description of our system, Two modelings which supplement each other from different angles have been successfully developed. The first one, a comprehensive kinetics model which can be applied to the detailed simulations of the temporal behavior of the discharge characteristics and laser performance, is constructed by a set of coupled first -order differential equations, such as the rate equations, the Boltzmann equation, the external electric circuit equations, the energy balance equation, and the equations of optical resonator. The starting and termination of the discharge are taken into deliberation for the first time, especially for the Blumlein case. Some 70 kinetic processes and 23 chemical species are included. Such a problem can only be numerically solved by means of an elaborate computer code. Another model, on the other hand, pays attention to the quasi-steady-state to facilitate parametric study. A group of rate coefficients for the kinetic processes involving free electrons are approximated by analytic expressions using numerical results compiled from computer code calculations. Explicit expressions of the number densities for all relevant chemical species are obtained. Among them, HCI(O), H, and Cl can never reach steady-state population. Time history of the concentrations for these species are computed instead. With the discussions about the effect of vibrational relaxation and state-to-state transfer in the upper energy level, and the discussions about the rotational structure, collisional broadening, and dissociation of the diatomic ground state, we have extensively investigated the spontaneous emission spectra, the small-signal gain, the non-saturable absorption, the steady-state laser output power, and various efficiencies. Saturation effects in laser oscillators and laser amplifiers are discussed as well. These topics relate to the

  12. The Nike electron-beam-pumped KrF laser amplifiers

    SciTech Connect

    Sethian, J.D.; Pawley, C.J.; Obenschain, S.P.


    Nike is a recently completed multikilojoule krypton-fluoride (KrF) laser that has been built to study the physics of direct-drive inertial confinement fusion. The two final amplifiers of the Nike laser are both electron-beam-pumped systems. This paper describes these two amplifiers, with an emphasis on the pulsed power. The smaller of the two has a 20 x 20 cm aperture, and produces an output laser beam energy in excess of 100 J. This 20 cm Amplifier uses a single 12 kJ Marx generator to inject two 300 kV, 75 kA, 140 ns flat-top electron beams into opposite sides of the laser cell. The larger amplifier in Nike has a 60 x 60 cm aperture, and amplifies the laser beam up to 5 kJ. This 60 cm amplifier has two independent electron beam systems. Each system has a 170 kJ Marx generator that produces a 670 kV, 540 kA, 240 ns flat-top electron beam. Both amplifiers are complete, fully integrated into the laser, meet the Nike system requirements, and are used routinely for laser-target experiments.

  13. Excimer lasers

    NASA Technical Reports Server (NTRS)

    Palmer, A. J.; Hess, L. D.; Stephens, R. R.


    A theoretical and experimental investigation into the possibility of achieving CW discharge pumped excimer laser oscillation is reported. Detailed theoretical modeling of capillary discharge pumping of the XeF and KXe and K2 excimer systems was carried out which predicted the required discharge parameters for reaching laser threshold on these systems. Capillary discharge pumping of the XeF excimer system was investigated experimentally. The experiments revealed a lower excimer level population density than predicted theoretically by about an order of magnitude. The experiments also revealed a fluorine consumption problem in the discharge in agreement with theory.

  14. Double-sided electron-beam generator for KrF laser excitation

    SciTech Connect

    Schlitt, L.; Swingle, J.


    Several laser systems excited by electron beam have been identified as candidates for pump sources for laser fusion applications. The electron beam generators required must be compact, reliable and capable of synchronization with other system components. A KrF laser producing a minimum output of 25 J was needed for the RAPIER (Raman Amplifier Pumped by Intensified Excimer Radiation) system. A double-sided electron beam system was designed and constructed specifically for this purpose and has produced > 35 J of KrF output. Each of the two electron beam machines in the system operates with an rms jitter of 0.4 ns and together occupy approx. 3.5 m/sup 2/ of floor space. The successful operation of this laser has engendered requests for a description of the engineering details of this system. This document contains a brief description of the design issues and a full set of engineering drawings for this KrF laser amplifier.

  15. Narrow bandwidth tuning of rhodamine 6G dye pumped by a XeCl excimer laser

    SciTech Connect

    Shangguan Cheng; Ling Ying-yi; Wang Yi-man; Dou Ai-rong; Huang Dan-hong


    In this paper the experimental study for narrow bandwidth tuning of ethylene glycol solution of rhodamine 6G pumped by a XeCl excimer laser is reported. The tunable range from 572.7 nm to 612.9 nm with linewidth of 0.004 nm has been obtained. The conversion efficiency is 16.0%. The experimental results of seven other dyes are also presented.

  16. Blue satellites of absorption spectrum study of sodium based excimer-pumped alkali vapor laser

    NASA Astrophysics Data System (ADS)

    Hu, Shu; Gai, Baodong; Guo, Jingwei; Tan, Yannan; Liu, Jinbo; Li, Hui; Cai, Xianglong; Shi, Zhe; Liu, Wanfa; Jin, Yuqi; Sang, Fengting


    Sodium based excimer-pump alkali laser (Na-XPAL) is expected to be an efficient method to generate sodium beacon light, but the information about the spectroscopic characters of Na-XPAL remains sparse so far. In this work, we utilized the relative fluorescence intensity to study the absorption spectrum of blue satellites of complexes of sodium with different collision partners. The yellow fluorescence of Na D1 and D2 line was clearly visible. After processing the fluorescence intensity and the input pumping laser relative intensity, we obtained the Na-CH4 system's blue satellites was from 553nm to 556nm. Meanwhile, we experimentally demonstrated the Na-Ar and Na-Xe system's wavelength range of blue satellites. Also, it was observed that the Na-Xe system's absorption was stronger than the other two systems.

  17. Excimer-pumped alkali vapor lasers: a new class of photoassociation lasers

    NASA Astrophysics Data System (ADS)

    Readle, J. D.; Wagner, C. J.; Verdeyen, J. T.; Spinka, T. M.; Carroll, D. L.; Eden, J. G.


    Excimer-pumped alkali vapor lasers (XPALs) are a new class of photoassociation lasers which take advantage of the spectrally broad absorption profiles of alkali-rare gas collision pairs. In these systems, transient alkali-rare gas molecules are photopumped from the thermal continuum to a dissociative X2Σ+ 1/2 interaction potential, subsequently populating the n2P3/2 state of the alkali. The absorption profiles >=5 nm and quantum efficiencies >98% have been observed in oscillator experiments, indicating XPAL compatibility with conventional high power laser diode arrays. An alternative technique for populating the n2P3/2 state is direct photoexcitation on the n2P3/2<--n2S1/2 atomic transition. However, because the XPAL scheme employs an off-resonant optical pump, the strengths of resonantly-enhanced nonlinear processes are minimized. Additionally, the absorption coefficient may be adjusted by altering the number densities of the lasing species and/or perturbers, a valuable asset in the design of large volume, high power lasers. We present an overview of XPAL lasers and their operation, including the characteristics of recently demonstrated systems photopumped with a pulsed dye laser. Lasing has been observed in Cs at both 894 nm and 852 nm by pumping CsAr or CsKr pairs as well as in Rb at 795 nm by pumping RbKr. These results highlight the important role of the perturbing species in determining the strength and position of the excimer absorption profile. It is expected that similar results may be obtained in other gas mixtures as similar collision pair characteristics have historically been observed in a wide variety of transient diatomic species.

  18. Excimer lasers

    NASA Technical Reports Server (NTRS)

    Palmer, A. J.; Hess, L. D.; Stephens, R. R.; Pepper, D. M.


    The results of a two-year investigation into the possibility of developing continuous wave excimer lasers are reported. The program included the evaluation and selection of candidate molecular systems and discharge pumping techniques. The K Ar/K2 excimer dimer molecules and the xenon fluoride excimer molecule were selected for study; each used a transverse and capillary discharges pumping technique. Experimental and theoretical studies of each of the two discharge techniques applied to each of the two molecular systems are reported. Discharge stability and fluorine consumption were found to be the principle impediments to extending the XeF excimer laser into the continuous wave regime. Potassium vapor handling problems were the principal difficulty in achieving laser action on the K Ar/K2 system. Of the four molecular systems and pumping techniques explored, the capillary discharge pumped K Ar/K2 system appears to be the most likely candidate for demonstrating continuous wave excimer laser action primarily because of its predicted lower pumping threshold and a demonstrated discharge stability advantage.

  19. Wavelength conversion with excimer lasers

    SciTech Connect

    Booker, J.; Eichner, L.; Storz, R.H.; Bucksbaum, P.H.; Freeman, R.R.


    Harmonic generation was studied using a high powered, ultrashort pulse KrF excimer laser. Third, fifth, and seventh harmonic outputs were observed at 82.8 nm, 49.7 nm, and 35.5 nm. The nonlinear interaction took place at the intersection of the laser focus with a pulsed, supersonic gas jet expansion.

  20. Biocompatible layers fabricated using KrF laser

    NASA Astrophysics Data System (ADS)

    Jelínek, Miroslav; Kocourek, Tomás; Vrbová, Miroslava; Konarík, David; Remsa, Jan


    Thin films of hydroxyapatite, hydroxyapatite doped with silver and thin diamond like carbon layers were prepared using KrF excimer laser deposition. Tooth prostheses, textile blood vessels and artificial heart valves were covered and tested. Examples of physical tests, and in vitro and in vivo analysis using minipigs and sheep are presented.

  1. Short-wavelength stimulated raman scattering in a silica fiber pumped by an XeBr excimer laser

    SciTech Connect

    Mizunami, T.; Takagi, K.


    A UV-grade silica optical fiber was pumped by a 281.8 nm XeBr excimer laser. The first Stokes spectrum was observed at 285 nm. The spectral width was one half of that of the spontaneous Raman spectrum. A numerical analysis of stimulated Raman scattering which includes two-photon absorption loss is presented. The Raman-gain coefficient was determined by the analysis of observed nonlinearity in Stokes output and was found to be 1.8 x 10/sup -5/ cm/MW. It was also shown that two-photon absorption is a more important loss factor than linear attenuation. The shortest limit of wavelength for amplification by stimulated Raman scattering is also discussed.

  2. UV-VUV excimer emitter pumped by a subnormal glow discharge

    SciTech Connect

    Shuaibov, Aleksandr K; Dashchenko, Arkadii I; Shevera, Igor' V


    Characteristics of a small-size excimer emitter operating on an Ar - Cl{sub 2} mixture excited by a subnormal glow discharge are studied. It is shown that this discharge is a source of multiwavelength emission in a range of 175 - 258 nm. The optimum pressures lie in ranges of 0.3 - 0.5 kPa for chlorine and 2 - 4 kPa for argon. The average power of UV- VUV emission reaches 0.7 W, with the emission efficiency equal to 3 %. The emitter can be used in microelectronics, high-energy chemistry, short-wavelength photometry, biophysics, and medicine. (laser applications and other topics in quantum electronics)

  3. Electron collisions with cesium atoms - benchmark calculations and application to modeling an excimer-pumped alkali laser

    NASA Astrophysics Data System (ADS)

    Zatsarinny, Oleg; Bartschat, Klaus; Babaeva, Natalia; Kushner, Mark


    The B-spline R-matrix (BSR) with pseudostates method was employed to describe electron collisions with cesium atoms. Over 300 states were kept in the close-coupling expansion, including a large number of pseudostates to model the effect of the Rydberg spectrum and the ionization continuum on the results for transitions between the discrete physical states of interest. Predictions for elastic scattering, excitation, and ionization for incident energies up to 200 eV are presented and compared to previous results [2,3] and experimental data. Our data were used to model plasma formation in the excimer-pumped alkali laser, XPAL, operating on the Cs (62P3 / 2 , 1 / 2 --> (62S1 / 2) (852nm and 894nm) transitions. At sufficiently high operating temperature, pump power, and repetition rate, plasma formation in excess of 1014--1015cm-3 occurs. This may reduce laser output power by electron collisional mixing of the upper and lower laser levels. Work supported by the NSF under PHY-1068140, PHY-1212450, and the XSEDE allocation PHY-090031 (OZ, KB), and by the DoD High Energy Laser Multidisciplinary Research Initiative (NYB, MJK).

  4. Electron collisions with cesium atoms—benchmark calculations and application to modeling an excimer-pumped alkali laser

    NASA Astrophysics Data System (ADS)

    Zatsarinny, Oleg; Bartschat, Klaus; Babaeva, Natalia Yu; Kushner, Mark J.


    The B-spline R-matrix (BSR) with pseudostates method is employed to describe electron collisions with cesium atoms. Over 300 states are kept in the close-coupling expansion, including a large number of pseudostates to model the effect of the Rydberg spectrum and, most importantly, the ionization continuum on the results for transitions between the discrete physical states of interest. Predictions for elastic scattering, momentum transfer, excitation and ionization are presented for incident energies up to 200 eV and compared with results from previous calculations and available experimental data. In a second step, the results are used to model plasma formation in an excimer-pumped alkali laser operating on the Cs (62P3/2,1/2 → 62S1/2) (852 nm and 894 nm) transitions. At sufficiently high operating temperature of a Cs-Ar containing quartz cell, pump power, and repetition rate, plasma formation in excess of 1014-1015 cm-3 occurs. This may reduce laser output power by electron collisional mixing of the upper and lower laser levels.

  5. Numbers Of Merit In Excimer Laser Reliability Analysis

    NASA Astrophysics Data System (ADS)

    Austin, Lindsay; Basting, Dirk; Kahlert, Hans-Jurgen; Rebhan, Ulrich; Muckenheim, Wolfgang


    Recent results confirm new advances in XeC1 excimer laser discharge design have achieved major milestones in reliability - 1010 pulses without replacing the thyratron, electrodes, capacitors or power supply. Other data on standard KrF excimer lasers allow statistical analysis of numbers of merit, including MTBF and maintenance intervals. Projections are made of operating costs and maintenance for both continuous operation and low duty cycle of two different size lasers with all major gases: XeCl, KrF and ArF.

  6. Single-photon ionization quadrupole mass spectrometry with an electron beam pumped excimer light source.


    Mühlberger, F; Wieser, J; Morozov, A; Ulrich, A; Zimmermann, R


    The application of soft ionization methods for mass spectrometry (MS), such as single-photon ionization (SPI) using vacuum ultraviolet (VUV) light, provides powerful analytical instrumentation for real-time on-line monitoring of organic substances in gaseous matrixes. A compact and mobile quadrupole mass spectrometer (QMS) system using a novel electron beam pumped rare gas VUV lamp for SPI has been developed for on-line analysis of organic trace compounds (ppb concentrations). The VUV radiation of the light source is employed for SPI in the ion source of the QMS. The concept of the interfacing of the VUV light source with the QMS is described and the SPI-QMS is characterized. On-line detection limits down to 50 ppb for benzene, toluene, and m-xylene were achieved. The instrument is well suited for continuous measurements of aromatic and aliphatic trace compounds and can therefore be used for on-line monitoring of trace compounds in dynamically fluctuating process gases. First measurements of gas standards, petrochemical samples, and on-line monitoring of automotive exhaust are presented. PMID:15801756

  7. KrF laser-induced ablation and patterning of Y--Ba--Cu--O films

    SciTech Connect

    Heitz, J.; Wang, X.Z.; Schwab, P.; Baeuerle, D. ); Schultz, L. )


    The ablation and patterning of Y--Ba--Cu--O films on (100) SrTiO{sub 3} and (100) MgO substrates by KrF excimer-laser light projection was investigated. Three different regimes of laser-material interactions were observed. Transition temperatures and critical current densities in laser-fabricated strip lines were investigated.

  8. Excimer Laser Surface Treatment Of Non-Ferrous Alloys

    NASA Astrophysics Data System (ADS)

    Georgiopoulos, Michael; Hontzopoulos, Elias I.; Fotakis, Costas; Tsipas, D. N.; Floros, T.


    Excimer laser (KrF, ArF) radiation has been used for the surface modification of Al - Si and Ni alloys with the aim to improve their corrosion-errosion and hardness properties. A variety of experimental techniques including direct laser surface treatment and laser assisted chemical vapour deposition (CVD) have been employed and the parameters for process optimization have been determined.

  9. Formation of short high-power laser radiation pulses in excimer mediums

    NASA Astrophysics Data System (ADS)

    Losev, V. F., Sr.; Ivanov, N. G.; Panchenko, Yu. N.


    Presently an excimer mediums continue are examined as one of variants for formation of powerful and over powerful pulses of laser radiation with duration from units of nanosecond up to tens femtosecond. The researches on such powerful installations as "NIKE" (USA) and << SUPER ASHURA >>, Japan) proceed in this direction. The main advantage of excimer mediums is the opportunity to work in a frequency mode, absence of restriction on the size of active area, high uniformity of a gas working medium, high efficiency (up to 10 %) and wide spectral range of laser radiation (KrF, XeCl ~ 2nm, XeF (C-A), Xe IICl ~ 50-100 nanometers). Research in area of high quality laser beams formation in excimer mediums and its amplification in high power amplifiers are carried out the long time in Institute of High Current Electronics SB RAS, Tomsk, Russia. The wide aperture XeCl laser system of MELS-4k is used for these investigations. Last time we take part in program on development of high power excimer laser system with a petawatt level of power. This system supposes the formation and amplification high quality laser beams with different pulse duration from units of nanosecond up to tens femtosecond. We research the possibility of laser beams formation in excimer mediums with ps-ns pulse duration having the low noise and divergence near to diffraction limit. In other hand, we are developing the wide aperture XeF(C-A) amplifier with optical pump on base electron accelerator. According to our estimations of the XeF(C-A) amplifier based on the converter of e-beam energy to the Xe II* fluorescence at 172 nm will allow to obtain up to 100 TW peak power in a 30 fs pulse.

  10. Excimer laser ablation of ferrites

    NASA Astrophysics Data System (ADS)

    Tam, A. C.; Leung, W. P.; Krajnovich, D.


    Laser etching of ferrites was previously done by scanning a focused continuous-wave laser beam on a ferrite sample in a chemical environment. We study the phenomenon of photo-ablation of Ni-Zn or Mn-Zn ferrites by pulsed 248-nm KrF excimer laser irradiation. A transfer lens system is used to project a grating pattern of a mask irradiated by the pulsed KrF laser onto the ferrite sample. The threshold fluence for ablation at the ferrite surface is about 0.3 J/cm2. A typical fluence of 1 J/cm2 is used. The etched grooves produced are typically 20-50 μm wide, with depths achieved as deep as 70 μm . Groove straightness is good as long as a sharp image is projected onto the sample surface. The wall angle is steeper than 60 degrees. Scanning electron microscopy of the etched area shows a ``glassy'' skin with extensive microcracks and solidified droplets being ejected that is frozen in action. We found that this skin can be entirely removed by ultrasonic cleaning. A fairly efficient etching rate of about 10 nm/pulse for a patterned area of about 2 mm×2 mm is obtained at a fluence of 1 J/cm2. This study shows that projection excimer laser ablation is useful for micromachining of ferrite ceramics, and indicates that a hydrodynamic sputtering mechanism involving droplet emission is a cause of material removal.

  11. Research on the characteristics of H sub 2 Raman conversion pumping by a 1-J XeCl excimer laser

    SciTech Connect

    Lou, Q. , P. O. Box 8730, Beijing, China and Shanghai Institute of Optics and Fine Mechanics, Academia Sinica, P. O. Box 8211, Shanghai, China )


    Detailed results are presented of a high-efficiency Raman conversion of a 1-J XeCl excimer laser with an unstable resonator. We had 90% photon conversion of 18-MW-power XeCl laser radiation with 39% photon efficiency to the third Stokes order at 499 nm. The effects of rare-gas concentration in a H{sub 2}--rare-gas mixture on the Raman conversion characteristics were investigated. Finally, stimulated Raman scattering between the excited states of H{sub 2} at high gas pressure was observed, and conditions for generating these lines are discussed.

  12. Stimulated Raman scattering in lead vapor pumped by a long-pulse 1-J XeCl excimer laser

    SciTech Connect

    Lou, Q.; Huo, Y.


    The parametric dependence of the output energies and efficiencies for the Raman conversion of the radiation from a long-pulse 1-J XeCl excimer laser in Pb vapor was investigated. The effects of atom depletion and buffer gas on the stimulated Raman scattering output were discussed in detail. Multipeak structures of the waves of the Raman-shifted pulses were observed which could be attributed to the coherent effects in Raman scattering. A computer model was introduced to explain the multipeak structures of the stimulated Raman scattering waveforms.

  13. Excimer laser ablation of ferrite ceramics

    NASA Astrophysics Data System (ADS)

    Tam, A. C.; Leung, W. P.; Krajnovich, D.

    We study the ablation of Ni-Zn or Mn-7n ferrites by 248-nm KrF excimer laser irradiation for high-resolution patterning. A transfer lens system is used to project the image of a mask irradiated by the pulsed KrF laser onto the ferrite sample. The threshold fluente for ablation of the ferrite surface is about 0.3 J/cm2. A typical fluente of 1 J/cm2 is used to produce good-quality patterning. Scanning electron microscopy of the ablated area shows a "glassy" skin with extensive microcracks and solidified droplets being ejected that is frozen in action. This skin can be removed by ultrasonic cleaning.

  14. Experimental Investigation and Modeling of Kinetic Processes in a KrF Laser

    NASA Astrophysics Data System (ADS)

    Bychkov, Yu. I.; Yastremskii, A. G.; Yampolskaya, S. A.; Losev, V. F.; Dudarev, V. V.; Panchenko, Yu. N.; Puchikin, A. V.


    The KrF laser with radiation pulse duration at half maximum of 20 ns is experimentally investigated. A self-consistent model is developed considering the electric circuit, the kinetic processes in the active medium, and the formation of laser radiation in a resonator. Time dependences of the discharge current and voltage on the capacitor and discharge electrodes, plasma particle concentration, and rate constants of the processes determining the characteristics of the discharge and laser radiation are presented. Processes are revealed that determines the characteristics of the space charge and laser radiation. The kinetics of the processes of production and annihilation of KrF excimer molecules is studied in detail. It is demonstrated that high rates of destruction of excimer molecules increases the time of delay of generation thereby decreasing the efficiency of laser generation and limiting the possibility of decreasing laser radiation pulse duration.

  15. Excimer Laser Ablation of Egg Tempera Paints and Varnishes

    NASA Astrophysics Data System (ADS)

    Morais, P. J.; Bordalo, R.; Santos, L. dos; Marques, S. F.; Salgueiredo, E.; Gouveia, H.

    In this work a series of egg tempera paint and varnish systems have been prepared, artificially aged and irradiated with KrF excimer laser at a wavelength of 248 nm. The samples were prepared with pure pigments and selected mixtures. It was found that, for some pigments, the colour changed upon laser irradiation even at low energy densities, below the ablation threshold while for other inorganic pigmented egg temperas the degree of discoloration is very small at moderate fluence of ˜0.30 J cm?2. The varnish systems did not present signs of discoloration. The thickness, superficial roughness and magnitude of the colour changes of the samples were measured. X-ray diffraction, Raman spectroscopy and UV/visible spectroscopy were used in order to investigate the changes induced by the KrF excimer laser radiation.

  16. Nuclear pumped electronic transition laser studies

    NASA Technical Reports Server (NTRS)

    Hughes, W. M.; Helmick, H. H.


    An experiment is proposed that should yield unambiguous absolute results on the production efficiency of rare gas excimers from fission fragments. Laser threshold efficiency is parameterized and calculations indicate that some lasers can be operated using relatively simple experimental apparatus adjacent to GODIVA. Operation of a KrF excimer laser adjacent to GODIVA appears to be possible, although the neutron pulse width is not well matched to the laser pulse duration. However, calculation indicates that KrF excimer laser output on the order of a joule may be possible.

  17. Efficiency of excimer molecule formation in plasma jets of inert gas mixtures with SF6 and CCl4

    NASA Astrophysics Data System (ADS)

    Rogulich, V. S.; Starodub, V. P.; Shevera, V. S.


    The formation of krypton and xenon monofluorides and monochlorides in continuous plasma jets of inert gas mixtures with SF6 and CCl4 molecules is investigated experimentally. Absolute concentrations of KrF, XeF, KrCl, and XeCl excimer molecules in the jet are determined. The energy efficiency of specific input power conversion to the spontaneous B-X emission in the KrF band is estimated at 2-4 percent. Ways of increasing the concentration of excimer molecules in the plasma jet are analyzed.

  18. A survey of advanced excimer optical imaging and lithography

    NASA Astrophysics Data System (ADS)

    Matsumoto, Koichi; Suwa, Kyoichi


    The first item discussed in this paper is to estimate the future trend regarding minimum geometry and the optical parameters, such as NA and wavelength. Simulations based on aerial images are performed for the estimation. The resolution limit is defined as a minimum feature size which retains practical depth of focus (DOF). Pattern geometry is classified into two categories, which are dense lines and isolated lines. Available wavelengths are assumed to be KrF excimer laser (λ=248 nm), ArF excimer laser (λ=193 nm) and F2 excimer laser (λ=157 nm). Based upon the simulation results, the resolution limit is estimated for each geometry and each wavelength. The second item is to survey ArF optics. At present, the ArF excimer laser is regarded as one of the most promising candidates as a next-generation light source. Discussions are ranging over some critical issues. The lifetime of ArF optics supposedly limited by the radiation compaction of silica glass is estimated in comparison with KrF optics. Availability of calcium fluoride (CaF2) is also discussed. As a designing issue, a comparative study is made about the optical configuration, dioptric or catadioptric. In the end, our resist-based performance is shown.

  19. Excimer Laser Application For Cataract Surgery

    NASA Astrophysics Data System (ADS)

    Bath, Patricia E.; Mueller, Gerhard; Apple, David J.; Stolzenburg, Norbert M.


    The ablation threshold of bovine lenses was determined for excimer laser radiatiF at 308 nanreters. The ablation th5eshold for bovine lenses was approximately 0.6J/cm +/-0.1J/cm , for cortex and 1J/cm for nucleus. The threshold for bovine nucleus was higher than the threshold for cortex and difference was statistically significant at the 0.05 level. The relatively low ablation threshold for bovine lenses demonstrates the potential effectiveness of excimer laser radiation at 308 nm for cataract surgery. An experimental prototype has been developed and results of its application demonstrated. Further experiments to demonstrate safety for the retina and adjacent ocular structures are necessary because of the well known hazards of ultraviolet radiation. The potential of theleymir laser for keratorefractive surgery is currently under intensive investigation. In preliminary studies the ablation behavior of bovine lenses was investigated. The objective of this study was to quantify ablation rates as the first step in determining the specification for a laser system which would be practical in the clinical setting. Although excimer laser systems are available at 193 nm (ArF), 248 (KrF) and 351 (xeF) we selected 308 nm because of the availability of fiberoptics for the transmission of 308 nm as well as the known absorbance of human lenses in the 280 nm region.

  20. Ignition by excimer laser photolysis of ozone

    SciTech Connect

    Lucas, D.; Dunn-Rankin, D.; Hom, K.; Brown, N.J.


    The authors have ignited mixtures of hydrogen, oxygen, and ozone in closed cells with 248 nm radiation from a KrF excimer laser. Ozone, the only significant absorber in this system, absorbs a single photon and produces oxygen atoms which initiate combustion. A discretized, time-dependent Beer's law model is used to demonstrate that the radical concentration immediately after photolysis is a function of laser power, ozone concentration, focal length, and separation between the lens and reactions cell. Spark schlieren photographs are used to visualize the ignition events and identify the ignition sites. The effects of equivalence ratio, pressure, and the initial gas temperature on the minimum ozone concentration needed to produce ignition are presented, and only the initial temperature has a significant effect.

  1. The NIKE KrF laser program

    SciTech Connect

    Sethian, J.D.; Bodner, S.E.; Gerber, K.A.; Lehmberg, R.H.; McLean, E.A.; Obenschain, S.P.; Pawley, C.J.; Pronko, M.S.; Stamper, J.A.; Deniz, A.V.; Hardgrove, J.; Lehecka, T.; McGeoch, M.W.


    NIKE is a large angularly multiplexed Krypton-Fluoride (KrF) laser under development at the Naval Research Laboratory. It is designed to explore the technical and physics issues of direct drive laser fusion. When completed, NIKE will deliver 2--3 kJ of 248 nm light in a 4 nsec pulse with intensities exceeding 2{times}10{sup 14} W/cm{sup 2} onto a planar target. Spatially and temporally incoherent light will be used to reduce the ablation pressure nonuniformities to less than 2% in the target focal plane. These parameters are predicted to be those required for a high gain ICF pellet. The NIKE system consists of a commercial oscillator/amplifier front end, an array of gas discharge amplifiers, two electron beam pumped amplifiers (one with a 20{times}20 cm{sup 2} aperture, the other with a 60{times}60 cm{sup 2} aperture) and the optics required to relay, encode, and decode the beam. Approximately two-thirds of the system is operational and currently undergoing tests. The output of the smaller e-beam system, the 20 cm Amplifier, exceeds both the uniformity and energy required to drive the final e-beam system, the 60 cm Amplifier. The pulsed power components of the 60 cm Amplifier have been built, and initial tests show the electron beam deposited by the system meets the laser requirements for pumping uniformity and energy deposition. {copyright} 1994 {ital American} {ital Institute} {ital of} {ital Physics}

  2. UV Raman spectroscopy of H2-air flames excited with a narrowband KrF laser

    NASA Technical Reports Server (NTRS)

    Shirley, John A.


    Raman spectra of H2 and H2O in flames excited by a narrowband KrF excimer laser are reported. Observations are made over a porous-plug, flat-flame burner reacting H2 in air, fuel-rich with nitrogen dilution to control the temperature, and with an H2 diffusion flame. Measurements made from UV Raman spectra show good agreement with measurements made by other means, both for gas temperature and relative major species concentrations. Laser-induced fluorescence interferences arising from OH and O2 are observed in emission near the Raman spectra. These interferences do not preclude Raman measurements, however.

  3. Generation of strongly coupled plasmas by high power excimer laser

    NASA Astrophysics Data System (ADS)

    Zhu, Yongxiang; Liu, Jingru; Zhang, Yongsheng; Hu, Yun; Zhang, Jiyan; Zheng, Zhijian; Ye, Xisheng


    (ultraviolet). To generate strongly coupled plasmas (SCP) by high power excimer laser, an Au-CH-Al-CH target is used to make the Al sample reach the state of SCP, in which the Au layer transforms laser energy to X-ray that heating the sample by volume and the CH layers provides necessary constraints. With aid of the MULTI-1D code, we calculate the state of the Al sample and its relationship with peak intensity, width and wavelength of laser pulses. The calculated results suggest that an excimer laser with peak intensity of the magnitude of 1013W/cm2 and pulse width being 5ns - 10ns is suitable to generate SCP with the temperature being tens of eV and the density of electron being of the order of 1022/cm-3. Lasers with shorter wavelength, such as KrF laser, are preferable.

  4. Phosphorus doping of 4H SiC by liquid immersion excimer laser irradiation

    SciTech Connect

    Ikeda, Akihiro; Nishi, Koji; Ikenoue, Hiroshi; Asano, Tanemasa


    Phosphorus doping of 4H SiC is performed by KrF excimer laser irradiation of 4H SiC immersed in phosphoric acid. Phosphorus is incorporated to a depth of a few tens of nanometers at a concentration of over 10{sup 20}/cm{sup 3} without generating significant crystal defects. Formation of a pn junction diode with an ideality factor of 1.06 is demonstrated.

  5. Excimer laser ablation of polymer-clay nanocomposites

    NASA Astrophysics Data System (ADS)

    Chang, I.-Ta

    The ablation behavior of Polystyrene-Organically Modified Montmorillonite (OMMT) nanocomposites was evaluated by measuring the weight loss induced by KrF excimer laser irradiation of the nanocomposite specimens under air atmosphere. The characteristic values of ablation, ablation threshold fluence and effective absorption coefficient for polystyrene and its naonocomposites were calculated based on the weight loss data. The effects of morphology due to spatial variation in injection molded samples are also discussed in this work. Results demonstrate that both the dispersion state and the concentration of clay play important roles in excimer laser ablation. The sensitivity of threshold fluence and absorption coefficient to dispersion state of OMMT depends on the clay concentration. The excimer laser induced surface micro/nano structure formation and modification of PS-Clay Nanocomposites at various OMMT concentrations were also investigated. Scanning electron microscopy, atomic force microscopy and Fourier Transform Infrared (FTIR) spectroscopy with attenuated total reflectance accessory were utilized to analyze the ablated surface. Results show that, in general, better dispersion of OMMT leads to less continuous surface structures and more pronounced carbonyl regions on FTIR spectra. Clay nanoparticles are exposed on ablated surfaces and affect surface structure formation after irradiation by laser. A mechanism for the formation of excimer laser induced surface structures on injection molded parts is thus proposed.

  6. Compact ultrafast orthogonal acceleration time-of-flight mass spectrometer for on-line gas analysis by electron impact ionization and soft single photon ionization using an electron beam pumped rare gas excimer lamp as VUV-light source.


    Mühlberger, F; Saraji-Bozorgzad, M; Gonin, M; Fuhrer, K; Zimmermann, R


    Orthogonal acceleration time-of-flight mass spectrometers (oaTOFMS), which are exhibiting a pulsed orthogonal extraction of ion bunches into the TOF mass analyzer from a continuous primary ion beam, are well-suited for continuous ionization methods such as electron impact ionization (EI). Recently an electron beam pumped rare gas excimer lamp (EBEL) was introduced, which emits intensive vacuum UV (VUV) radiation at, e.g., 126 nm (argon excimer) and is well suited as the light source for soft single photon ionization (SPI) of organic molecules. In this paper, a new compact oaTOFMS system which allows switching between SPI, using VUV-light from an EBEL-light source, and conventional EI is described. With the oaTOFMS system, EBEL-SPI and EI mass spectral transients can be recorded at very high repetition rates (up to 100 kHz), enabling high duty cycles and therefore good detection efficiencies. By using a transient recorder card with the capability to perform on-board accumulation of the oaTOF transients, final mass spectra with a dynamic range of 106 can be saved to the hard disk at a rate of 10 Hz. As it is possible to change the ionization modes (EI and SPI) rapidly, a comprehensive monitoring of complex gases with highly dynamic compositions, such as cigarette smoke, is possible. In this context, the EI based mass spectra address the bulk composition (compounds such as water, oxygen, carbon dioxide, etc. in the up to percentage concentration range) as well as some inorganic trace gases such as argon, sulfur dioxide, etc. down to the low ppm level. The EBEL-SPI mass spectra on the other hand are revealing the organic composition down to the lower ppb concentration range. PMID:17900147

  7. Excimer Laser Etching

    SciTech Connect

    Boatner, Lynn A; Longmire, Hu Foster; Rouleau, Christopher M; Gray, Allison S


    Excimer laser radiation at a wavelength of = 248 nm represents a new etching method for the preparation of metallographic specimens. The method is shown to be particularly effective for enhancing the contrast between different phases in a multiphase metallographic specimen.

  8. Breakdown voltages for discharges initiated from plasma pulses produced by high-frequency excimer lasers

    SciTech Connect

    Yamaura, Michiteru


    The triggering ability under the different electric field was investigated using a KrF excimer laser with a high repetition rate of kilohertz order. Measurements were made of the magnitude of impulse voltages that were required to initiate a discharge from plasmas produced by a high-frequency excimer laser. Breakdown voltages were found to be reduced by 50% through the production of plasmas in the discharge gap by a high-frequency excimer laser. However, under direct-current electric field, triggering ability decreased drastically due to low plasma density. It is considered that such laser operation applied for laser-triggered lightning due to the produced location of plasma channel is formed under the impulse electric field since an electric field of the location drastically reduces temporary when the downward leader from thunderclouds propagates to the plasma channel.

  9. Excimer laser system Profile-500

    NASA Astrophysics Data System (ADS)

    Atejev, V. V.; Bukreyev, V. S.; Vartapetov, Serge K.; Semenov, A. D.; Sugrobov, V. A.; Turin, V. S.; Fedorov, Sergei N.


    The description of ophthalmological excimer laser system 'PROFILE-500' for photorefractive and physiotherapeutic keratectomy is presented. Excimer Laser Systems 'PROFILE- 500' are optical system that use ArF excimer lasers to perform photorefractive keratectomy or LASIK; surgical procedures used to correct myopia, hyperopia and astigmatism.

  10. Laser excited fluorescence in the cesium-xenon excimer and the cesium dimer

    NASA Technical Reports Server (NTRS)

    Exton, R. J.; Snow, W. L.; Hillard, M. E.


    Argon ion laser lines are used to excite fluorescence in a mixture of cesium and xenon. Excimer band fluorescence is observed at higher pressures (about 1 atm) while at lower pressures (several torr) a diffuse fluorescence due to the cesium dimer is observed whose character changes with exciting wavelength. The excimer fluorescence is shown to be directly related to the location of the exciting wavelength within previously measured Cs/Xe line shapes. This fact suggests that the excimer systems may be efficiently pumped through these line shapes. Qualitative energy-level schemes are proposed to explain the observations in both the excimer and dimer systems.

  11. Excimer lamp stereolithography

    NASA Astrophysics Data System (ADS)

    Satoh, Saburoh; Tanaka, Takao; Ihara, Satoshi; Yamabe, Chobei


    For the laser stereo-lithography, a XeCl excimer lamp with cylindrical tube has been adopted to achieve a lower cost type UV light source. Because of excellent high output efficiency, it is possible to be down sizing of a power supplier and a lamp head and to be air-cooling. And moreover to extract the maximum output power and efficiency, we applied an optical fiber system for its lithography optics. With this excimer lamp the maximum UV emission per pulse 25 (mu) J at 100 Hz and the maximum average power 10 mW at 1000 Hz were obtained.

  12. Excimer Lasers In Medicine

    NASA Astrophysics Data System (ADS)

    Tittel, Frank K.; Saidi, Iyad S.; Pettit, George H.; Wisoff, P. J.; Sauerbrey, Roland A.


    Excimer lasers emit light energy, short optical pulses at ultraviolet wavelengths, that results in a unique laser tissue interaction. This has led to an increasing number of studies into medical applications of these lasers in fields such as ophthalmology, urology, cardiology and neurology.

  13. Excimer laser induced nanostructuring of silicon surfaces.


    Kumar, Prashant; Krishna, Mamidipudi Ghanashyam; Bhattacharya, Ashok


    The effect of KrF excimer laser energy density (below and above the ablation threshold), number of shots and angle of laser incidence on the morphological reconstruction, structure and specular reflectance of Si[311] surfaces is reported. At low energy densities (0.1 to 0.3 J/cm2) laser irradiation results in a variety of nanostructures, depending on laser energy density and number of shots, such as nanopores (40-60 nm dia) and nanoparticles (40-80 nm dia). At energies greater than the laser ablation threshold (2 to 5 J/cm2) the formation of nanowires (200 nm dia, 6-8 microm length), and closely spaced silicon nanograins (100-150 nm dia) is observed. Experiments to study the effect of laser irradiation in the proximity of a fixed shape such as a linear step edge in the form of a stainless steel blade and a cylindrical cross-section Cu wire were also carried out. In both cases, linearly organized nanoparticles (150-200 nm diameter) and nanowires (60-80 nm diameter) formed close to the edge. There is a systematic degradation of long-range order with the number of shots and laser energy density as evidenced from X-ray diffraction studies. At an energy density of 2 J/cm2, and 100 shots the [311] oriented silicon surface made a transition to a randomly oriented nanocrystalline state. PMID:19452995

  14. Ignition by excimer laser photolysis of ozone

    SciTech Connect

    Lucas, D.; Dunn-Rankin, D.; Hom, K.; Brown, N.J.


    We have ignited mixtures of hydrogen, oxygen, and ozone in closed cells with 248 nm radiation from a KrF excimer laser. Ozone, the only significant absorber in this system, absorbs a single photon and produces oxygen atoms which initiate combustion. A discretized, time-dependent Beer's law model is used to demonstrate that the radical concentration immediately after photolysis is a function of laser power, ozone concentration, focal length, and separation between the lens and reaction cell. Spark schileren photographs are used to visualize the ignition events and identify the ignition sites. The effects of equivalence ratio, pressure, and the initial gas temperature on the minimum ozone concentration needed to produce ignition are presented, and only the initial temperature has a significant effect. Modelling studies of the ignition process aid in the interpretation of the experimental results, and show that the ignition we observe is not due solely to thermal effects, but is strongly dependent on the number and type of radicals present initially after photolysis. Ignition using other hydocarbons as fuels was also demonstrated. 30 refs., 9 figs. 2 tabs.

  15. Ignition by excimer laser photolysis of ozone

    SciTech Connect

    Lucas, D.; Dunn-Rankin, D.; Hom, K.; Brown, N.J.


    The authors have ignited mixtures of hydrogen, oxygen, and ozone in closed cells with 248 nm radiation from a KrF excimer laser. Ozone, the only significant absorber in this system, absorbs a single photon and produces oxygen atoms which initiate combustion. A discretized, time-dependent Beer's law model is used to demonstrate that the radical concentration immediately after photolysis is a function of laser power, ozone concentration, focal length, and separation between the lens and reaction cell. Spark schlieren photographs are used to visualize the ignition events and identify the ignition sites. The effects of equivalence ratio, pressure, and the initial gas temperature on the minimum ozone concentration needed to produce ignition are presented, and only the initial temperature has a significant effect. Modelling studies of the igniton process aid in the interpretation of the experimental results, and show that the ignition is not due solely to thermal effects, but is strongly dependent on the number and type of radicals present initially after photolysis. Ignition using other hydrocarbons as fuels was also demonstrated.

  16. Single photon ionization time-of-flight mass spectrometry with a pulsed electron beam pumped excimer VUV lamp for on-line gas analysis: setup and first results on cigarette smoke and human breath.


    Mühlberger, F; Streibel, T; Wieser, J; Ulrich, A; Zimmermann, R


    Single-photon ionization (SPI) using vacuum ultraviolet (VUV) light produced by an electron beam pumped rare gas excimer source has been coupled to a compact and mobile time-of-flight mass spectrometer (TOFMS). The novel device enables real-time on-line monitoring of organic trace substances in complex gaseous matrixes down to the ppb range. The pulsed VUV radiation of the light source is employed for SPI in the ion source of the TOFMS. Ion extraction is also carried out in a pulsed mode with a short time delay with respect to ionization. The experimental setup of the interface VUV light source/time-of-flight mass spectrometer is described, and the novel SPI-TOFMS system is characterized by means of standard calibration gases. Limits of detection down to 50 ppb for aliphatic and aromatic hydrocarbons were achieved. First on-line applications comprised real-time measurements of aromatic and aliphatic trace compounds in mainstream cigarette smoke, which represents a highly dynamic fluctuating gaseous matrix. Time resolution was sufficient to monitor the smoking process on a puff-by-puff resolved basis. Furthermore, human breath analysis has been carried out to detect differences in the breath of a smoker and a nonsmoker, respectively. Several well-known biomarkers for smoke could be identified in the smoker's breath. The possibility for even shorter measurement times while maintaining the achieved sensitivity makes this new device a promising tool for on-line analysis of organic trace compounds in process gases or biological systems. PMID:16285693

  17. Excimer laser irradiation of metal surfaces

    NASA Astrophysics Data System (ADS)

    Kinsman, Grant

    In this work a new method of enhancing CO2 laser processing by modifying the radiative properties of a metal surface is studied. In this procedure, an excimer laser (XeCl) or KrF) exposes the metal surface to overlapping pulses of high intensity, 10(exp 8) - 10(exp 9) W cm(exp -2), and short pulse duration, 30 nsec FWHM (Full Width Half Maximum), to promote structural and chemical change. The major processing effect at these intensities is the production of a surface plasma which can lead to the formation of a laser supported detonation wave (LSD wave). This shock wave can interact with the thin molten layer on the metal surface influencing to a varying degree surface oxidation and roughness features. The possibility of the expulsion, oxidation and redeposition of molten droplets, leading to the formation of micron thick oxide layers, is related to bulk metal properties and the incident laser intensity. A correlation is found between the expulsion of molten droplets and a Reynolds number, showing the interaction is turbulent. The permanent effects of these interactions on metal surfaces are observed through scanning electron microscopy (SEM), transient calorimetric measurements and Fourier transform infrared (FTIR) spectroscopy. Observed surface textures are related to the scanning procedures used to irradiate the metal surface. Fundamental radiative properties of a metal surface, the total hemispherical emissivity, the near-normal spectral absorptivity, and others are examined in this study as they are affected by excimer laser radiation. It is determined that for heavily exposed Al surface, alpha' (10.6 microns) can be increased to values close to unity. Data relating to material removal rates and chemical surface modification for excimer laser radiation is also discussed. The resultant reduction in the near-normal reflectivity solves the fundamental problem of coupling laser radiation into highly reflective and conductive metals such as copper and aluminum. The

  18. Raman shifting of KrF laser radiation for tropospheric ozone measurements

    NASA Technical Reports Server (NTRS)

    Grant, William B.; Browell, Edward V.; Higdon, Noah S.; Ismail, Syed


    The differential absorption lidar (DIAL) measurement of tropospheric ozone requires use of high average power UV lasers operating at two appropriate DIAL wavelengths. Laboratory experiments have demonstrated that a KrF excimer laser can be used to generate several wavelengths with good energy conversion efficiencies by stimulated Raman shifting using hydrogen (H2) and deuterium (D2). Computer simulations for an airborne lidar have shown that these laser emissions can be used for the less than 5 percent random error, high resolution measuremment of ozone across the troposphere using the DIAL technique. In the region of strong ozone absorption, laser wavelengths of 277.0 and 291.7 nm were generated using H2 and D2, respectively. In addition, a laser wavelength at 302.0 nm was generated using two cells in series, with the first containing D2 and the second containing H2. The energy conversion efficiency for each wavelength was between 14 and 27 percent.

  19. Overview on the high power excimer laser technology

    NASA Astrophysics Data System (ADS)

    Liu, Jingru


    High power excimer laser has essential applications in the fields of high energy density physics, inertial fusion energy and industry owing to its advantages such as short wavelength, high gain, wide bandwidth, energy scalable and repetition operating ability. This overview is aimed at an introduction and evaluation of enormous endeavor of the international high power excimer laser community in the last 30 years. The main technologies of high power excimer laser are reviewed, which include the pumping source technology, angular multiplexing and pulse compressing, beam-smoothing and homogenous irradiation, high efficiency and repetitive operation et al. A high power XeCl laser system developed in NINT of China is described in detail.

  20. KrF lasers for inertial confinement fusion

    SciTech Connect

    Harris, D.B.; Cartwright, D.C.; Figueira, J.F.; McDonald, T.E.; Sorem, M.E.


    The KrF laser has been proposed for inertial confinement fusion (ICF) since its discovery in 1975. Since that time, the laser has seen significant development and has been increased in energy many orders of magnitude to the several kilojoule energy level. The suitability of the KrF laser as a driver for ICF energy applications has been continually reviewed. The latest assessments indicate that the KrF laser still appears to be the leading laser candidate. A worldwide effort exists to advance the KrF laser for ICF applications. 21 refs., 1 fig.

  1. Osseointegration of KrF laser hydroxylapatite films on Ti6A14V alloy by mini-pigs: loaded osseointegration of dental implants

    NASA Astrophysics Data System (ADS)

    Dostalova, Tatjana; Jelinek, Miroslav; Himmlova, Lucia; Grivas, Christos


    Aim of study was to evaluate osseointegration of the KrF laser hydroxyapatite coated titanium alloy Ti6Al4V dental implants. For deposition KrF excimer laser in stainless- steel deposition chamber was used. Thickness of HA films were round 1 μm . Mini-pigs were used in this investigation. Implants were placed vertically into the lower jaw. After 14 weeks unloaded osseointegration the metal ceramic crowns were inserted. the experimental animals were sacrificed (1 year post insertion). The vertical position of implants was controlled with a radiograph. Microscopical sections were cut and ground. Sections were viewed using microscope with CCD camera. 1 year osseointegration in lower jaw confirmed by all implants presence of newly formed bone around the all implants. Laser-deposited coating the layer of fibrous connective tissue was seen only seldom. In the control group (titamium implant without cover) the fibrous connective tissue was seen between implant and newly formed bone.

  2. Excimer laser photoresist stripping

    NASA Astrophysics Data System (ADS)

    Genut, Menachem; Tehar-Zahav, Ofer; Iskevitch, Eli; Livshits, Boris


    A new method for stripping the most challenging photoresists on deep sub-micron technology semiconductor wafers has been developed. The method uses a combination of UV excimer laser ablation and reactive chemistry to strip the photoresist in a single dry process, eliminating the wet acids or solvents often used following ashing of high dose implantation (HDI) and reactive ion etching (RIE). The stripping process combines new removal mechanisms: chemical assisted UV excimer laser ablation/etching, laser induced chemical etching of side walls and residues, and enhanced combustion. During the laser pulses photolysis of the process gas occurs, UV laser radiation breaks the photoresist polymer chain bonds, and the photoresist (including foreign materials imbedded in it) is ablated. The combustion is ignited by the ablative impact of laser radiation and enhanced by the radicals formed during photo-thermal decomposition of the process gases. Following this process, the volatilized products and gases are evacuated. The optimum laser stripping conditions were developed to provide a wide process window for the most challenging stripping conditions, such as after HDI and RIE (metal, polysilicon), without causing damage to the wafer devices. A photoresist stripping system based on the described technology was designed and built. The system has been designated as the L-StripperTM and provides stripping time of 0.15 s/(micrometer cm2).

  3. High power excimer laser micromachining

    NASA Astrophysics Data System (ADS)

    Herbst, Ludolf; Paetzel, Rainer


    Today's excimer lasers are well-established UV laser sources for a wide variety of micromachining applications. The excimer's high pulse energy and average power at short UV wavelengths make them ideal for ablation of various materials, e. g., polyimide, PMMA, copper, and diamond. Excimer micromachining technology, driven by the ever-shrinking feature sizes of micro-mechanical and micro-electronic devices, is used for making semiconductor packaging microvias, ink jet nozzle arrays, and medical devices. High-power excimer laser systems are capable of processing large areas with resolution down to several microns without using wet chemical processes. For instance, drilling precise tapered holes and reel-to-reel manufacturing of disposable sensors have proven to be very cost-effective manufacturing techniques for volume production. Specifically, the new industrial excimer laser-the LAMBDA SX 315C-easily meets the high demands of cost-effective production. The stabilized output power of 315 watts at 300 Hz (308 nm) and its outstanding long-term stability make this laser ideal for high-duty-cycle, high-throughput micromachining. In this paper, high-power excimer laser technology, products, applications, and beam delivery systems will be discussed.

  4. Production excimer laser equipment overview

    NASA Astrophysics Data System (ADS)

    Sercel, Jeffrey P.


    Excimer lasers were commercialized in the late 1970's. The laser community thought that by the early 1980's these UV lasers would enjoy a fruitful industrial market position. CO2 and solid state lasers required almost two decades to be fully accepted as industrial machine while the excimer laser was expected to be a fast learner benefiting from the learning curve of its big brothers. In retrospect, early excimer lasers had a bad reputation for being complicated, expensive and frequently out of commission. By the late 1980's a few excimer laser manufacturers had engineered the problems to acceptable levels for successful pilot lines and small scale manufacturing to begin. At this time, the real industrial learning curves began as engineers worked to refine many subsystems and support technologies. Today, excimer lasers are being used as true industrial lasers. They have a bright future with numerous and diverse market opportunities. This paper is an overview of the technologies proven to be successful in adapting modern excimer lasers to successful full production situations.

  5. Direct synthesis of graphene on any nonmetallic substrate based on KrF laser ablation of ordered pyrolytic graphite

    NASA Astrophysics Data System (ADS)

    Xu, S. C.; Man, B. Y.; Jiang, S. Z.; Liu, A. H.; Hu, G. D.; Chen, C. S.; Liu, M.; Yang, C.; Feng, D. J.; Zhang, C.


    We present a method for few-layer graphene growth on nonmetallic substrates using excimer KrF laser ablation of ordered pyrolytic graphite. The graphene is scalable and its thickness is controllable. It can be deposited on virtually any nonmetallic substrates at a relative low temperature of 750 °C. This laser-based method is highly efficient and the whole growing process takes less than 100 s. Raman spectroscopy confirms the formation of sp2-bonded carbon with a grain size of about 40 nm. The optical transmittance and conductivity of the graphene films are comparable with exfoliated or metal-catalyzed graphene. This work demonstrates a promising laser-based, transfer-free technique for synthesis of graphene.

  6. PUMPS


    Thornton, J.D.


    A pump is described for conveving liquids, particure it is not advisable he apparatus. The to be submerged in the liquid to be pumped, a conduit extending from the high-velocity nozzle of the injector,and means for applying a pulsating prcesure to the surface of the liquid in the conduit, whereby the surface oscillates between positions in the conduit. During the positive half- cycle of an applied pulse liquid is forced through the high velocity nozzle or jet of the injector and operates in the manner of the well known water injector and pumps liquid from the main intake to the outlet of the injector. During the negative half-cycle of the pulse liquid flows in reverse through the jet but no reverse pumping action takes place.

  7. Electra: Repetitively Pulsed Angularly Multiplexed KrF Laser System Performance

    NASA Astrophysics Data System (ADS)

    Wolford, Matthew; Myers, Matthew; Giuliani, John; Sethian, John; Burns, Patrick; Hegeler, Frank; Jaynes, Reginald


    As in a full size fusion power plant beam line, Electra is a multistage laser amplifier system. The multistage amplifier system consists of a commercial discharge laser and two doubled sided electron beam pumped amplifiers. Angular multiplexing is used in the optical layout to provide pulse length control and to maximize laser extraction from the amplifiers. Two angularly multiplexed beams have extracted 30 J of KrF laser light with an aperture 8 x 10 cm^2, which is sufficient to extract over 500 J from the main amplifier and models agree. The main amplifier of Electra in oscillator mode has demonstrated single shot and rep-rate laser energies exceeding 700 J with 100 ns pulsewidth at 248 nm with an aperture 29 x 29 cm^2. Continuous operation of the KrF electron beam pumped oscillator has lasted for more than 2.5 hours without failure at 1 Hz and 2.5 Hz. The measured intensity and pulse energy for durations greater than thousand shots are consistent at measurable rep-rates of 1 Hz, 2.5 Hz and 5 Hz.

  8. Vacuum barrier for excimer lasers


    Shurter, Roger P.


    A barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yarns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput.

  9. Vacuum barrier for excimer lasers


    Shurter, R.P.


    A barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yarns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput. 3 figs.

  10. Automatic alignment of double optical paths in excimer laser amplifier

    NASA Astrophysics Data System (ADS)

    Wang, Dahui; Zhao, Xueqing; Hua, Hengqi; Zhang, Yongsheng; Hu, Yun; Yi, Aiping; Zhao, Jun


    A kind of beam automatic alignment method used for double paths amplification in the electron pumped excimer laser system is demonstrated. In this way, the beams from the amplifiers can be transferred along the designated direction and accordingly irradiate on the target with high stabilization and accuracy. However, owing to nonexistence of natural alignment references in excimer laser amplifiers, two cross-hairs structure is used to align the beams. Here, one crosshair put into the input beam is regarded as the near-field reference while the other put into output beam is regarded as the far-field reference. The two cross-hairs are transmitted onto Charge Coupled Devices (CCD) by image-relaying structures separately. The errors between intersection points of two cross-talk images and centroid coordinates of actual beam are recorded automatically and sent to closed loop feedback control mechanism. Negative feedback keeps running until preset accuracy is reached. On the basis of above-mentioned design, the alignment optical path is built and the software is compiled, whereafter the experiment of double paths automatic alignment in electron pumped excimer laser amplifier is carried through. Meanwhile, the related influencing factors and the alignment precision are analyzed. Experimental results indicate that the alignment system can achieve the aiming direction of automatic aligning beams in short time. The analysis shows that the accuracy of alignment system is 0.63μrad and the beam maximum restoration error is 13.75μm. Furthermore, the bigger distance between the two cross-hairs, the higher precision of the system is. Therefore, the automatic alignment system has been used in angular multiplexing excimer Main Oscillation Power Amplification (MOPA) system and can satisfy the requirement of beam alignment precision on the whole.

  11. An electrically triggered 200 kV rail-gap switch for wide aperture excimer lasers

    NASA Astrophysics Data System (ADS)

    Endoh, A.; Watanabe, S.; Watanabe, M.


    A wide aperture (7 x 7 sq cm), high output energy (5 J in KrF and 13.8 J in XeCl), UV preionized excimer laser is described. A self-breakdown rail gap was employed as an output switch with the maximum voltage and current up to 230 kV and 300 kA, respectively. To solve the switching jitter problem associated with the self-breakdown, an electrical triggering was investigated. The measured minimum switching time delay and gap closing time were 40 and 10 ns, respectively. The number of channels up to 50 was observed with a uniform distribution over the 80-cm electrode length. The triggering jitter was measured to be less than a nanosecond. The maximum operation voltage of the triggered rail gap was 200 kV. The successful trigger operation was obtained in the range 30-98 percent of the self-breakdown voltage.

  12. Multi-level diffractive optical elements produced by excimer laser ablation of sol-gel.


    Neiss, Estelle; Flury, Manuel; Mager, Loïc; Rehspringer, Jean-Luc; Fort, Alain; Montgomery, Paul; Gérard, Philippe; Fontaine, Joël; Robert, Stéphane


    Material ablation by excimer laser micromachining is a promising approach for structuring sol-gel materials as we demonstrate in the present study. Using the well-known direct etching technique, the behaviour of different hybrid organic/inorganic self-made sol-gel materials is examined with a KrF* laser. Ablated depths ranging from 0.1 to 1.5 microm are obtained with a few laser pulses at low fluence (< 1 J/cm(2)). The aim is to rapidly transfer surface relief multi-level diffractive patterns in such a substrate, without intermediate steps. The combination with the 3D profilometry technique of coherence probe microscopy permits to analyse the etching process with the aim of producing multi-level Diffractive Optical Elements (DOE). Examples of four-level DOEs with 10 microm square elementary cells are presented, as well as their laser reconstructions in the infrared. PMID:18773015

  13. Photo-fragmentation of selenium powder by Excimer laser ablation in liquids

    NASA Astrophysics Data System (ADS)

    Van Overschelde, O.; Guisbiers, G.


    Laser ablation in liquids is especially adapted to produce nanoparticles free of any contamination as suited for biological and medical applications. A KrF Excimer laser delivering an UV light at 248 nm and operating at low fluence (F~0.5 J/cm2) was used to irradiate a micro-sized powder of selenium dispersed into a de-ionized water solution. To avoid any agglomeration of the selenium nanoparticles during the irradiation, surfactants (SDS and CTAB) were added to the solution and their efficiency was compared. The concentration of surfactants had to be chosen around the critical micellar concentration to produce small selenium nanoparticles (<60 nm). Moreover, SDS shows better mono-disperse size distribution compared to CTAB. Finally, photo-fragmentation is found to be more efficient than bulk thermal ablation to produce very small selenium nanoparticles (less than 10 nm).

  14. Resonant third harmonic generation of KrF laser in Ar gas.


    Rakowski, R; Barna, A; Suta, T; Bohus, J; Földes, I B; Szatmári, S; Mikołajczyk, J; Bartnik, A; Fiedorowicz, H; Verona, C; Verona Rinati, G; Margarone, D; Nowak, T; Rosiński, M; Ryć, L


    Investigations of emission of harmonics from argon gas jet irradiated by 700 fs, 5 mJ pulses from a KrF laser are presented. Harmonics conversion was optimized by varying the experimental geometry and the nozzle size. For the collection of the harmonic radiation silicon and solar-blind diamond semiconductor detectors equipped with charge preamplifiers were applied. The possibility of using a single-crystal CVD diamond detector for separate measurement of the 3rd harmonic in the presence of a strong pumping radiation was explored. Our experiments show that the earlier suggested 0.7% conversion efficiency can really be obtained, but only in the case when phase matching is optimized with an elongated gas target length corresponding to the length of coherence. PMID:25554270

  15. Resonant third harmonic generation of KrF laser in Ar gas

    NASA Astrophysics Data System (ADS)

    Rakowski, R.; Barna, A.; Suta, T.; Bohus, J.; Földes, I. B.; Szatmári, S.; Mikołajczyk, J.; Bartnik, A.; Fiedorowicz, H.; Verona, C.; Verona Rinati, G.; Margarone, D.; Nowak, T.; Rosiński, M.; Ryć, L.


    Investigations of emission of harmonics from argon gas jet irradiated by 700 fs, 5 mJ pulses from a KrF laser are presented. Harmonics conversion was optimized by varying the experimental geometry and the nozzle size. For the collection of the harmonic radiation silicon and solar-blind diamond semiconductor detectors equipped with charge preamplifiers were applied. The possibility of using a single-crystal CVD diamond detector for separate measurement of the 3rd harmonic in the presence of a strong pumping radiation was explored. Our experiments show that the earlier suggested 0.7% conversion efficiency can really be obtained, but only in the case when phase matching is optimized with an elongated gas target length corresponding to the length of coherence.

  16. Resonant third harmonic generation of KrF laser in Ar gas

    SciTech Connect

    Rakowski, R.; Barna, A.; Suta, T.; Földes, I. B.; Bohus, J.; Szatmári, S.; Mikołajczyk, J.; Bartnik, A.; Fiedorowicz, H.; Verona, C.; Verona Rinati, G.; Margarone, D.; Nowak, T.; and others


    Investigations of emission of harmonics from argon gas jet irradiated by 700 fs, 5 mJ pulses from a KrF laser are presented. Harmonics conversion was optimized by varying the experimental geometry and the nozzle size. For the collection of the harmonic radiation silicon and solar-blind diamond semiconductor detectors equipped with charge preamplifiers were applied. The possibility of using a single-crystal CVD diamond detector for separate measurement of the 3rd harmonic in the presence of a strong pumping radiation was explored. Our experiments show that the earlier suggested 0.7% conversion efficiency can really be obtained, but only in the case when phase matching is optimized with an elongated gas target length corresponding to the length of coherence.

  17. High power KrF laser development at Los Alamos

    SciTech Connect

    McDonald, T.; Cartwright, D.; Fenstermacher, C.; Figueira, J.; Goldstone, P.; Harris, D.; Mead, W.; Rosocha, L.


    The objective of the high power laser development program at Los Alamos is to appraise the potential of the KrF laser as a driver for inertial confinement fusion (ICF), ultimately at energy levels that will produce high target gain (gain of order 100). A KrF laser system prototype, the 10-kJ Aurora laser, which is nearing initial system operation, will serve as a feasibility demonstration of KrF technology and system design concepts appropriate to large scale ICF driver systems. The issues of affordable cost, which is a major concern for all ICF drivers now under development, and technology scaling are also being examined. It is found that, through technology advances and component cost reductions, the potential exists for a KrF driver to achieve a cost goal in the neighborhood of $100 per joule. The authors suggest that the next step toward a multimegajoule laboratory microfusion facility (LMF) is an ''Intermediate Driver'' facility in the few hundred kilojoule to one megajoule range, which will help verify the scaling of driver technology and cost to an LMF size. An Intermediate Driver facility would also increase the confidence in the estimates of energy needed for an LMF and would reduce the risk in target performance. 5 refs., 4 figs., 1 tab.

  18. Plasma mirrors for short pulse KrF lasers.


    Gilicze, Barnabás; Barna, Angéla; Kovács, Zsolt; Szatmári, Sándor; Földes, István B


    It is demonstrated for the first time that plasma mirrors can be successfully applied for KrF laser systems. High reflectivity up to 70% is achieved by optimization of the beam quality on the plasma mirror. The modest spectral shift and the good reflected beam quality allow its applicability for high power laser systems for which a new arrangement is suggested. PMID:27587094

  19. Recent progress in the Los Alamos KrF Program

    SciTech Connect

    McDonald, T.E.; Cartwright, D.C.; Coggeshall, S.V.; Fenstermacher, C.A.; Figueira, J.F.; Foreman, L.R.; Goldstone, P.D.; Hanson, D.E.; Harris, D.B.; Hauer, A.A.


    The goal of the Inertial Confinement Fusion Program (ICF) is to develop the ability to ignite and burn small masses of thermonuclear fuel. Although the present near-term objectives of the program are directed toward defense applications, ICF research continues to be carried out with a view to the longer term goal of commercial power production. The characteristics of a KrF laser make it an attractive candidate as an ICF driver. The KrF wavelength of 248 nm provides a target coupling that is very high at intensities of 10/sup 14/w/cm/sup 2/. In addition, the KrF laser can be repetitively operated at frequencies appropriate for a power reactor and has an intrinsically high efficiency, which allows projections to the long-term goal of energy production. The ICF program at Los Alamos consists of driver development, target design and fabrication, and target experimentation. The major effort at present is the investigation and development of KrF technology to determine its applicability for use in a laboratory driver at Los Alamos. Such a driver would be used in defense related technology studies and in areas of scientific study such as highly ionized materials and high-energy-density physics.

  20. Plasma mirrors for short pulse KrF lasers

    NASA Astrophysics Data System (ADS)

    Gilicze, Barnabás; Barna, Angéla; Kovács, Zsolt; Szatmári, Sándor; Földes, István B.


    It is demonstrated for the first time that plasma mirrors can be successfully applied for KrF laser systems. High reflectivity up to 70% is achieved by optimization of the beam quality on the plasma mirror. The modest spectral shift and the good reflected beam quality allow its applicability for high power laser systems for which a new arrangement is suggested.

  1. Excimer states in microhydrated adenine clusters.


    Smith, V R; Samoylova, E; Ritze, H-H; Radloff, W; Schultz, T


    We present femtosecond pump-probe mass and photoelectron spectra for adenine (A) and microhydrated A(m)(H(2)O)(n) clusters. Three distinct relaxation processes of photoexcited electronic states were distinguished: in unhydrated A, relaxation of the optically bright pipi* state occurred via the dark npi* state with respective lifetimes of <0.1 and 1.3 ps. In microhydrated clusters A(H(2)O)(n), relaxation via the npi* state is quenched by a faster relaxation process, probably involving pisigma* states. For the predominantly hydrogen-bonded adenine dimer (A(2)), excited state relaxation is dominated by monomer-like processes. When the adenine dimer is clustered with several water molecules, we observe a nanosecond lifetime from excimer states in pi-stacked clusters. From the electron spectra we estimate adiabatic ionization potentials of 8.32 eV (A), 8.27 eV (A(H(2)O)(1)), 8.19 eV (A(H(2)O)(2)), 8.10 eV (A(H(2)O)(3)), 8.18 eV (A(2)), and 8.0 eV (A(2)(H(2)O)(3-5)). PMID:20556283

  2. Random noise can help to improve synchronization of excimer laser pulses

    PubMed Central

    Mingesz, Róbert; Barna, Angéla; Mellár, János


    Recently, we have reported on a compact microcontroller-based unit developed to accurately synchronize excimer laser pulses (Mingesz et al. 2012 Fluct. Noise Lett. 11, 1240007 (doi:10.1142/S021947751240007X)). We have shown that dithering based on random jitter noise plus pseudorandom numbers can be used in the digital control system to radically reduce the long-term drift of the laser pulse from the trigger and to improve the accuracy of the synchronization. In this update paper, we present our new experimental results obtained by the use of the delay-controller unit to tune the timing of a KrF excimer laser as an addition to our previous numerical simulation results. The hardware was interfaced to the laser using optical signal paths in order to reduce sensitivity to electromagnetic interference and the control algorithm tested by simulations was applied in the experiments. We have found that the system is able to reduce the delay uncertainty very close to the theoretical limit and performs well in real applications. The simple, compact and flexible system is universal enough to also be used in various multidisciplinary applications. PMID:26998325

  3. Random noise can help to improve synchronization of excimer laser pulses.


    Mingesz, Róbert; Barna, Angéla; Gingl, Zoltán; Mellár, János


    Recently, we have reported on a compact microcontroller-based unit developed to accurately synchronize excimer laser pulses (Mingesz et al. 2012 Fluct. Noise Lett. 11, 1240007 (doi:10.1142/S021947751240007X)). We have shown that dithering based on random jitter noise plus pseudorandom numbers can be used in the digital control system to radically reduce the long-term drift of the laser pulse from the trigger and to improve the accuracy of the synchronization. In this update paper, we present our new experimental results obtained by the use of the delay-controller unit to tune the timing of a KrF excimer laser as an addition to our previous numerical simulation results. The hardware was interfaced to the laser using optical signal paths in order to reduce sensitivity to electromagnetic interference and the control algorithm tested by simulations was applied in the experiments. We have found that the system is able to reduce the delay uncertainty very close to the theoretical limit and performs well in real applications. The simple, compact and flexible system is universal enough to also be used in various multidisciplinary applications. PMID:26998325

  4. Excimer laser in arthroscopic surgery

    NASA Astrophysics Data System (ADS)

    Koort, Hans J.


    The development of efficient high-power lasersystems for use in surgery, especially in arthroscopic fields, leads to a new push for all endoscopic techniques. Both techniques, laser and endoscope, complete each other in an ideal way and allow applications which could not be reached with conventional techniques. One of the newer laser types is the excimer laser, which will be a good choice for surface treatment because of its very considerate interaction with tissue. One example is the ablation or smoothing of articular cartilage and meniscal shaving in orthopaedics. On the other hand, the power of this laser system is high enough to cut tissue, for instance in the lateral release, and offers therefore an alternative to the mechanical and electrical instruments. All lasers can only work fine with effective delivery systems. Sometimes there is only a single fiber, which becomes very stiff at diameters of more than 800 micrometers . This fiber often allows only the tangential treatment of tissue, most of the laser power is lost in the background. New fiber systems with many, sometimes hundreds of very thin single fibers, could offer a solution. Special handpieces and fibersystems offer distinct advantages in small joint arthroscopy, especially those for use with excimer lasers will be discussed.

  5. Excimer lasers drive large-area microprocessing

    NASA Astrophysics Data System (ADS)

    Delmdahl, Ralph; Tapié, Jean-Luc


    Excimer lasers emitting in the UV to far UV region are by nature the laser sources enabling the highest optical resolution and strongest material-photon interaction. At the same time, excimer lasers deliver unmatched UV pulse energies and output powers up to the kilowatt range. Thus, they are the key to fast and effective large area processing of smallest structures with micron precision. As a consequence, excimer lasers are the UV technology of choice when it comes to high-performance microstructuring with unsurpassed quality and process repeatability in applications such as drilling advanced ink jet nozzles or patterning biomedical sensor structures.

  6. 100-nm node lithography with KrF?

    NASA Astrophysics Data System (ADS)

    Fritze, Michael; Tyrrell, Brian; Astolfi, David K.; Yost, Donna; Davis, Paul; Wheeler, Bruce; Mallen, Renee D.; Jarmolowicz, J.; Cann, Susan G.; Liu, Hua-Yu; Ma, M.; Chan, David Y.; Rhyins, Peter D.; Carney, Chris; Ferri, John E.; Blachowicz, B. A.


    We present results looking into the feasibility of 100-nm Node imaging using KrF, 248-nm, exposure technology. This possibility is not currently envisioned by the 1999 ITRS Roadmap which lists 5 possible options for this 2005 Node, not including KrF. We show that double-exposure strong phase- shift, combined with two mask OPC, is capable of correcting the significant proximity effects present for 100-nm Node imaging at these low k1 factors. We also introduce a new PSM Paradigm, dubbed 'GRATEFUL,' that can image aggressive 100-nm Node features without using OPC. This is achieved by utilizing an optimized 'dense-only' imaging approach. The method also allows the re-use of a single PSM for multiple levels and designs, thus addressing the mask cost and turnaround time issues of concern in PSM technology.

  7. Semiconductor processing with excimer lasers

    SciTech Connect

    Young, R.T.; Narayan, J.; Christie, W.H.; van der Leeden, G.A.; Rothe, D.E.; Cheng, L.J.


    The advantages of pulsed excimer lasers for semiconductor processing are reviewed. Extensive comparisons of the quality of annealing of ion-implanted Si obtained with XeCl and ruby lasers have been made. The results indicate that irrespective of the large differences in the optical properties of Si at uv and visible wavelengths, the efficiency of usage of the incident energy for annealing is comparable for the two lasers. However, because of the excellent optical beam quality, the XeCl laser can provide superior control of the surface melting and the resulting junction depth. Furthermore, the concentrations of electrically active point defects in the XeCl laser annealed region are 2 to 3 orders of magnitude lower than that obtained from ruby or Nd:YAG lasers. All these results seem to suggest that XeCl lasers should be suitable for fabricating not only solar cells but also the more advanced device structures required for VLSI or VHSIC applications.

  8. Laser Plasma and Hydrodynamics Experiments with KrF Lasers

    NASA Astrophysics Data System (ADS)

    Weaver, James


    The proposed Fusion Test Facility (FTF) will exploit the unique features of Krypton Fluoride (KrF) lasers to achieve ignition and substantial gain (>20) at <500 kJ laser energies using direct drive.[1] The strategy uses highly uniform, high bandwidth, 248 nm KrF laser illumination at intensities near 2 x 10^15 W/cm^2 to accelerate low-aspect ratio pellets to implosion velocities of 400 km/s. Higher than usual implosion velocity allows ignition at substantially reduced laser energy. Amplitudes of both hydrodynamic instability during the pellet implosion and deleterious laser plasma instability (LPI) in the corona must be kept sufficiently low if one is to achieve ignition and gain. Increased laser intensity reduces hydrodynamic instability because it allows acceleration of thicker, low aspect ratio pellets, but is also more likely to produce deleterious LPI. The deep UV wavelength of KrF should allow use of these higher intensities. Studies of hydrodynamic instabilities and laser plasma instabilities (LPI) are the subject of ongoing experiments at the 2-3 kJ Nike KrF laser. The Nike laser has demonstrated highly uniform UV irradiation of planar targets at moderate laser intensities (I˜10^14 W/cm^2), including the recent addition of short duration ``spike'' prepulses for hydrodynamic stability studies. A new effort in LPI physics is underway at the Nike facility where the peak intensity is being extended above 10^15 W/cm^2 by a combination of smaller focal diameters and shorter pulse lengths. This talk will discuss progress in the ongoing experiments at Nike in support of the FTF design. [1] S. P. Obenschain, et al., Phys. Plasmas 13 056329 (2006).

  9. 308nm excimer laser in dermatology.


    Mehraban, Shadi; Feily, Amir


    308nm xenon-chloride excimer laser, a novel mode of phototherapy, is an ultraviolet B radiation system consisting of a noble gas and halide. The aim of this systematic review was to investigate the literature and summarize all the experiments, clinical trials and case reports on 308-nm excimer laser in dermatological disorders. 308-nm excimer laser has currently a verified efficacy in treating skin conditions such as vitiligo, psoriasis, atopic dermatitis, alopecia areata, allergic rhinitis, folliculitis, granuloma annulare, lichen planus, mycosis fungoides, palmoplantar pustulosis, pityriasis alba, CD30+ lympho proliferative disorder, leukoderma, prurigo nodularis, localized scleroderma and genital lichen sclerosus. Although the 308-nm excimer laser appears to act as a promising treatment modality in dermatology, further large-scale studies should be undertaken in order to fully affirm its safety profile considering the potential risk, however minimal, of malignancy, it may impose. PMID:25606333

  10. Granuloma Annulare Treated with Excimer Laser

    PubMed Central

    Ragi, Jennifer; Milgraum, Sandy


    Objective: To review the current therapy for granuloma annulare and report a case of refractory generalized granuloma annulare successfully treated with excimer laser. A discussion about the characteristics of excimer laser and the mechanism of its effectiveness is presented. Design: Patient case report and literature review. Setting: Outpatient dermatology practice. Participants: A 73-year-old woman suffering from generalized granuloma annulare for more than 40 years. Measurements: Change in clinical appearance of lesions. Results: Use of excimer laser therapy resulted in prompt and complete resolution in treated areas with no residual skin changes or side effects. Conclusion: Excimer laser therapy is a powerful treatment modality with minimal side effects for patients with granuloma annulare. Further study is necessary to elucidate optimal dosing, long-term efficacy, and safety profile. PMID:23198013

  11. Line Raman, Rayleigh, and laser-induced predissociation fluorescence technique for combustion with a tunable KrF excimer laser.


    Mansour, M S; Chen, Y C


    We have applied a line UV Raman, Rayleigh, and laser-induced predissociation fluorescence technique for measurement of turbulent hydrocarbon flames. The species concentration of CO(2), O(2), CO, N(2), CH(4), H(2)O, OH, and H(2) and the temperature are measured instantaneously and simultaneously along a line of 11.4 mm, from which the gradients with respect to mixture fraction and spatial direction are obtained. The technique has been successfully tested in a laminar premixed stoichiometric methane flame and a laminar hydrogen diffusion flame. In addition the technique has been tested in a highly turbulent rich premixed methane flame. The data show that the technique can be used to provide instantaneous measurements of local profiles that describe the local flame structure in highly turbulent flames. PMID:21102834

  12. Electra: durable repetitively pulsed angularly multiplexed KrF laser system

    NASA Astrophysics Data System (ADS)

    Wolford, Matthew F.; Myers, Matthew C.; Giuliani, John L.; Sethian, John D.; Burns, Patrick M.; Hegeler, Frank; Jaynes, Reginald


    Electra is a repetitively pulsed, electron beam pumped Krypton Fluoride (KrF) laser at the Naval Research Laboratory that is developing the technologies that can meet the Inertial Fusion Energy (IFE) requirements for durability, efficiency, and cost. The technologies developed on Electra should be directly scalable to a full size fusion power plant beam line. As in a full size fusion power plant beam line, Electra is a multistage laser amplifier system which, consists of a commercial discharge laser (LPX 305i, Lambda Physik), 175 keV electron beam pumped (40 ns flat-top) preamplifier, and 530 keV (100 ns flat-top) main amplifier. Angular multiplexing is used in the optical layout to provide pulse length control and to maximize laser extraction from the amplifiers. Single shot yield of 452 J has been extracted from the initial shots of the Electra laser system using a relatively low energy preamplifier laser beam. In rep-rate burst of 5 Hz for durations of one second a total energy of 1.585 kJ (average 317 J/pulse) has been attained. Total energy of 2.5 kJ has been attained over a two second period. For comparison, the main amplifier of Electra in oscillator mode has demonstrated at 2.5 Hz rep-rate average laser yield of 270 J over a 2 hour period.

  13. Effect of excimer laser on microbiological organisms

    SciTech Connect

    Keates, R.H.; Drago, P.C.; Rothchild, E.J.


    The effect of radiation emitted from an excimer laser filled with argon fluoride gas at 193 nm on Serratia marcescens, Pseudomonas aeruginosa, Staphylococcus aureus, streptococcus faecalis, Hemophilus influenzae, Candida albicans, and Aspergillus niger (collectively labeled the microorganisms) was examined. Colonies were subjected to a variable number of radiation pulses from the excimer laser applied after a 36-hour period of incubation at 37 degrees C, at which time the colonies were fully grown and showed no viability. The lack of viability was confirmed with a subculture from each area that received radiation; all subcultures were negative. The characteristics of the radiation paralleled those used by Serdavic, Darrell, Krueger, et al in 1985. This radiation treatment is believed to be within a therapeutic range, which suggests that the excimer laser, pending further investigation, may be useful in the treatment of corneal infections.

  14. 308-nm excimer laser in endodontics

    NASA Astrophysics Data System (ADS)

    Liesenhoff, Tim


    Root canal preparation was performed on 20 extracted human teeth. After opening the coronal pulp, the root canals were prepared by 308 nm excimer laser only. All root canals were investigated under SEM after separation in the axial direction. By sagittal separation of the mandibles of freshly slaughtered cows, it was possible to get access to the tissues and irradiate under optical control. Under irradiation of excimer laser light, tissue starts to fluoresce. It was possible to demonstrate that each tissue (dentin, enamel, bone, pulpal, and connective tissue) has a characteristic spectral pattern. The SEM analyses showed that it is well possible to prepare root canals safely. All organic soft tissue has been removed by excimer laser irradiation. There was no case of via falsa. The simultaneous spectroscopic identification of the irradiated tissue provides a safe protection from overinstrumentation. First clinical trials on 20 patients suffering of chronical apical parodontitis have been carried out successfully.

  15. Combination Of Narrow Bandwidth Excimer Laser And Monochromatic Reduction Projection Lens

    NASA Astrophysics Data System (ADS)

    Kajiyama, K.; Saito, K.; Moro, N.; Maeda, Y.; Natsuaki, H.


    This paper will discuss the problems associated with excimer laser photo-lithography -the combination of a KrF narrow band width excimer laser (non-injection locked type) with a large field fused silica monochromatic reduction lens. An excimer laser with a KrF narrow bandwidth, in combination with a large field monochromatic lens which is appropriate for use with such laser, have been developed and tested. The system's resolution capability has been confirmed at 0.4 um L/S with MP2400 resist. The laser has been designed so as to be installed and maintained in a clean room environment as well as to have a very narrow spectrum line. A very narrow band-width beam, down to 0.003nm, has been attained through a stable resonator with more than 20mJ pulse energy. The ultra-compact laser head (300mm x 545mm x 1100mm) contains a small laser discharge unit (182mm x 156mm x 584mm), and no amplifier because the oscillator is highly efficient in spite of the narrow line emission. Maintenance is much easier in the clean room environment. Users can replace the discharge unit as easily as they would change Hg-lamp, only taking twenty minutes, and while they clean the window and check the electrodes of the removed unit, the laser can be operated with the easily installed replacement -already passivated discharge unit. The laser head unit is separated from a gas circulating unit and trigger pulse circuit - vibration, heat, EMI noise and particle generation. Therefore, it can be installed even in the thermal clean chamber of a stepper. The N.A. (numerical aperture) of the monochromatic lens is 0.36 and the field size is 15mm x 15mm. In fact, three kinds of lenses with N.A.s of 0.4, 0.35 and 0.3 respectively, were designed and individually evaluated for their OTF's and defocus's dependence on the light source's spectral width, and also their co-relationship. In parallel, simulations on the relationship between each lens' chromatic aberration and laser spectral width were completed and

  16. The effect of microarc oxidation and excimer laser processing on the microstructure and corrosion resistance of Zr-1Nb alloy

    NASA Astrophysics Data System (ADS)

    Yang, Jiaoxi; Wang, Xin; Wen, Qiang; Wang, Xibing; Wang, Rongshan; Zhang, Yanwei; Xue, Wenbin


    The main purpose of this research was to investigate the effect of microarc oxidation (MAO) and excimer laser processing on the corrosion resistance of Zr-1Nb alloy in service environment. The pre-oxide film was fabricated on the surface of Zr-1Nb cladding tubes by MAO processing, and then subjected to KrF excimer laser irradiation. The surface morphology of the pre-oxide film was observed using a scanning electron microscope; phase compositions and quantities were determined using an X-ray diffraction; surface roughness was determined using a profilometer; and thermal expansion coefficient was measured using a dilatometer. Autoclave experiments were conducted for 94 days in an aqueous condition of 360 °C under 18.6 MPa in 0.01 mol/L LiOH solutions. The results showed that MAO + laser treatment resulted in a significant increase in the corrosion resistance of Zr-1Nb cladding tubes at high temperatures, because laser melting and etching could lead to a reduction in surface roughness and an increase in compactness of the pre-oxide film, and laser processing could promote the transformation of m-ZrO2 phase to t-ZrO2 phase. The best corrosion resistance was obtained when the pulse energy was 500 mJ, scanning speed was 0.13 mm/s, and pulse number was 2400.

  17. Effect of triggered discharge using an excimer laser with high-repetition-rate of the order of kilohertz

    SciTech Connect

    Yamaura, Michiteru; Watanabe, Takashi; Hayashi, Nobuya; Ihara, Satoshi


    The triggering ability of the laser-triggered lightning method is improved by using a KrF excimer laser with a high-repetition-rate of the order of kHz order. It is clarified that the effect of a triggered discharge is considerably enhanced when the plasma density is greater than 10{sup 13} cm{sup -3}. Thus far, the laser-triggered lightning method has not been expected to display a triggering ability since one pulse of an excimer laser possesses energy of less than 1 J, and the produced plasma has a low density of 10{sup 12} cm{sup -3}, its plasma density is one order lower than that required for its application in the triggering and guiding of lightning discharge. The enhancement of plasma density achieved by utilizing the accumulation effect of charged particles generated by the high-repetition-rate laser was 10{sup 13} cm{sup -3}. This led to an effective a 50% reduction in the self-breakdown voltage.

  18. Laser plasma instability experiments with KrF lasersa)

    NASA Astrophysics Data System (ADS)

    Weaver, J. L.; Oh, J.; Afeyan, B.; Phillips, L.; Seely, J.; Feldman, U.; Brown, C.; Karasik, M.; Serlin, V.; Aglitskiy, Y.; Mostovych, A. N.; Holland, G.; Obenschain, S.; Chan, L.-Y.; Kehne, D.; Lehmberg, R. H.; Schmitt, A. J.; Colombant, D.; Velikovich, A.


    Deleterious effects of laser-plasma instability (LPI) may limit the maximum laser irradiation that can be used for inertial confinement fusion. The short wavelength (248nm), large bandwidth, and very uniform illumination available with krypton-fluoride (KrF) lasers should increase the maximum usable intensity by suppressing LPI. The concomitant increase in ablation pressure would allow implosion of low-aspect-ratio pellets to ignition with substantial gain (>20) at much reduced laser energy. The proposed KrF-laser-based Fusion Test Facility (FTF) would exploit this strategy to achieve significant fusion power (150MW) with a rep-rate system that has a per pulse laser energy well below 1 MJ. Measurements of LPI using the Nike KrF laser are presented at and above intensities needed for the FTF (I˜2×1015W/cm2). The results to date indicate that LPI is indeed suppressed. With overlapped beam intensity above the planar, single beam intensity threshold for the two-plasmon decay instability, no evidence of instability was observed via measurements of 3/2ωo and 1/2ωo harmonic emissions.

  19. Excimer laser channel creation in polyethersulfone hollow fibers for compartmentalized in vitro neuronal cell culture scaffolds.


    Brayfield, Candace A; Marra, Kacey G; Leonard, John P; Tracy Cui, X; Gerlach, Jörg C


    Hollow fiber scaffolds that compartmentalize axonal processes from their cell bodies can enable neuronal cultures with directed neurite outgrowth within a three-dimensional (3-D) space for controlling neuronal cell networking in vitro. Controllable 3-D neuronal networks in vitro could provide tools for studying neurobiological events. In order to create such a scaffold, polyethersulfone (PES) microporous hollow fibers were ablated with a KrF excimer laser to generate specifically designed channels for directing neurite outgrowth into the luminal compartments of the fibers. Excimer laser modification is demonstrated as a reproducible method to generate 5microm diameter channels within PES hollow fiber walls that allow compartmentalization of neuronal cell bodies from their axons. Laser modification of counterpart flat sheet PES membranes with peak surface fluences of 1.2Jcm(-2) results in increased hydrophobicity and laminin adsorption on the surface compared with the unmodified PES surface. This is correlated to enhanced PC12 cell adhesion with increasing fluence onto laser-modified PES membrane surfaces coated with laminin when compared with unmodified surfaces. Adult rat neural progenitor cells differentiated on PES fibers with laser-created channels resulted in spontaneous cell process growth into the channels of the scaffold wall while preventing entrance of cell bodies. Therefore, laser-modified PES fibers serve as scaffolds with channels conducive to directing neuronal cell process growth. These hollow fiber scaffolds can potentially be used in combination with perfusion and oxygenation hollow fiber membrane sets to construct a hollow fiber-based 3-D bioreactor for controlling and studying in vitro neuronal networking in three dimensions between compartmentalized cultures. PMID:18060849

  20. Corneal topography of excimer laser photorefractive keratectomy.


    Klyce, S D; Smolek, M K


    The application of the 193 nm excimer laser for keratorefractive surgery promises to deliver a higher degree of precision and predictability than traditional procedures such as radial keratotomy. The development and evaluation of keratorefractive surgery have benefited from the parallel advances made in the field of corneal topography analysis. We used the Computed Anatomy Topography Modeling System (TMS-1) to analyze a Louisiana State University (LSU) Eye Center series of patients who had photorefractive keratectomy for the treatment of myopia with the VISX Twenty/Twenty excimer laser system. The excimer ablations were characterized by a relatively uniform distribution of surface powers within the treated zone. In the few cases that exhibited marked refractive regression, corneal topography analysis showed correlative changes. With topographical analysis, centration of the ablations relative to the center of the pupil could be evaluated. Marked improvement in centration occurred in the patients of LSU Series IIB in which the procedure to locate the point on the cornea directly over the pupil's center during surgery was refined. Corneal topographical analysis provides objective measures of keratorefractive surgical results and is able to measure the precise tissue removal effect of excimer laser ablation without the uncertainties caused by measuring visual acuity alone. Our observations forecast the need for improved aids to center the laser ablations and for the development of a course of treatment to prevent post-ablation stromal remodeling. PMID:8450433

  1. Excimer laser crystallization of amorphous silicon carbide produced by ion implantation

    NASA Astrophysics Data System (ADS)

    Hedler, A.; Urban, S.; Falk, F.; Hobert, H.; Wesch, W.


    4H-SiC was implanted with 100-250 keV Ge + and Xe + ions and doses of 1×10 14 to 1×10 16 cm -2 at room temperature in order to produce 40-200 nm thick amorphous surface layers. The samples were irradiated with 1-50,000 pulses of a KrF excimer laser (248 nm wavelength, 30 ns pulse duration) using fluences of 150-900 mJ/cm 2 to investigate the crystallization process as a function of the laser parameters. Crystallization as well as redistribution of the impurity atoms were analyzed by Rutherford backscattering spectrometry and infrared reflection measurements. Phase transitions occurring during the irradiation were studied by means of time-resolved reflectivity measurements. In order to explain the observed phase transitions numerical analysis was performed by solving the inhomogeneous heat flow equation using the parameters of the corresponding phases. In this work, we give a consistent description of the experimental results by the numerical simulations for the given laser setup. Depending on the amorphous layer thickness, melting, solidification, and crystallization of the amorphous phase can be effectively controlled by both the laser fluence and the number of laser pulses.

  2. Characterization of excimer laser ablation generated pepsin particles using multi-wavelength photoacoustic instrument

    NASA Astrophysics Data System (ADS)

    Hopp, B.; Kecskeméti, G.; Smausz, T.; Ajtai, T.; Filep, A.; Utry, N.; Kohut, A.; Bozóki, Z.; Szabó, G.


    Preparation of organic thin layers on various special substrates using the pulsed laser deposition (PLD) technique is an important task from the point of view of bioengineering and biosensor technologies. Earlier studies demonstrated that particle ejection starts during the ablating laser pulse resulting in significant shielding effects which can influence the real fluence on the target surface and consequently the efficiency of layer preparation. In this study, we introduce a photoacoustic absorption measurement technique for in-situ characterization of ablated particles during PLD experiments. A KrF excimer laser beam ( λ=248 nm, FWHM=18 ns) was focused onto pepsin targets in a PLD chamber; the applied laser fluences were 440 and 660 mJ/cm2. We determined the wavelength dependence of optical absorption and mass specific absorption coefficient of laser ablation generated pepsin aerosols in the UV-VIS-NIR range. On the basis of our measurements, we calculated the absorbance at the ablating laser wavelength, too. We demonstrated that when the laser ablation generated pepsin aerosols spread through the whole PLD chamber the effect of absorptivity is negligible for the subsequent pulses. However, the interaction of the laser pulse and the just formed particle cloud generated by the same pulse is more significant.

  3. The Role of Crystalline Water in the Interaction of Excimer Laser Light with Brushite

    NASA Astrophysics Data System (ADS)

    Dawes, M. L.; Langford, S. C.; Dickinson, J. T.


    A number of minerals of environmental interest contain waters of hydration, sometimes called crystalline water. Hydrated crystals often show dramatic changes in optical properties as well as mechanical properties, both influencing the response of the material to radiation. From an analytic point of view, very little is known about the influence of hydration regarding laser desorption and ablation phenomena. We explore the interaction of excimer laser light (KrF 248 nm) with single crystal brushite (CaHPO_4.2H_2O), a model biomineral phosphate containing H_2O. We first show that defects dominate the interactions as revealed by high sensitivity detection of Ca^+ at low fluences and that this ion emission predicts ablation thresholds. The most probable ion energy, which occurs at 11 eV, is much higher than the incident photon energy of 5 eV. The ion intensities also display a highly nonlinear fluence dependence, typically 6-8th order, entirely consistent with ion emission models we have recently presented. We show that laser coupling can be enhanced several orders of magnitude by generation of defects, i.e., by mechanical treatment, heating, or exposure to electron beams and that the consequences of crystalline H_2O and HPO_4^2- decomposition play major and related roles in this defect production.

  4. Glass etching initiated by excimer laser photolysis of CF/sub 2/Br/sub 2/

    SciTech Connect

    Brannon, J.H.


    KrF and ArF excimer laser irradiation of glass surfaces immersed in gaseous CF/sub 2/Br/sub 2/ is found to induce etching. The etch mechanism is considered to be nonthermal on the basis of the small value of the glass absorption coefficent and wavelength variable etching experiments. The etch rate dependence on surface fluence is presented for three pressures. SEM photos reveal a rough surface morphology in the etched region that apparently is not a chemical effect but results solely from the laser irradiation. Photochemical and spectroscopic analysis of the irradiated gas provides evidence for CF/sub 2/ and CF/sub 2/Br as being major photolysis products. C/sub 2/F/sub 4/ was also found to cause etching at 248 and 193 nm. This is evidence that CF/sub 2/, resulting from C/sub 2/F/sub 4/ photolysis, is alone capable of initiating glass etching in the presence of laser light. The paper concludes by discussing the observed inability of the CF/sub 3/ releasing parent gases CF/sub 3/Br and CF/sub 3/I to significantly etch glass when irradiated in their appropriate absorption bands. 31 references, 9 figures, 1 table.

  5. Surface properties modifications obtained on ceramics and metals resulting from excimer laser processing technique

    NASA Astrophysics Data System (ADS)

    Nicolas, Gines; Autric, Michel L.; Ocana, Jose L.


    The unique properties of a UV laser beam (high energy, short pulse duration) allow to transform the surface of ultrahard materials such as ceramics. In this way, a KrF excimer laser was used in this study in order to modify in selected zones, the surface of metals (aluminum alloy, titanium alloy and stainless steel) and oxides (Al2O3, ZrO2), carbide (SiC) and nitride (AlN). These ceramics possess good mechanical and thermal properties but exhibit a brittle behavior due to the granular structure. In a suitable range where the irradiated zone is melted and defects are removed, initial properties are modified (roughness, porosity, hardness, chemical composition). A cleaned and smoothed surface can be obtained without pores and cracks. These sites where corrosion attack starts are minimized and can lead to improve functions in potential industrial applications. The results presented in this work have been obtained by different analysis techniques such as scanning electron microscopy (SEM) to examine morphology, Auger spectroscopy (AES) to give chemical composition and depths profiles, mechanical tests to show roughness and hardness, grazing X-ray diffraction (XRD) to find structure.

  6. Effect of ambient environment on excimer laser induced micro and nano-structuring of stainless steel

    NASA Astrophysics Data System (ADS)

    Umm-i-Kalsoom; Bashir, Shazia; Ali, Nisar; Akram, Mahreen; Mahmood, Khaliq; Ahmad, Riaz


    The effect of laser fluence and an ambient environment on the formation and development of the micro and nano-structures on the laser irradiated stainless steel (AISI-304) targets have been investigated. For this purpose KrF excimer laser (λ = 248 nm, t = 20 ns, repetition rate 20 Hz) has been used. The targets are exposed for various laser fluences ranging from 0.72 J cm-2 to 1.27 J cm-2 under the vacuum condition and in the oxygen environment at a pressure of 133 mbar. Various features of treated targets, such as surface morphology, chemical composition and crystalline structure are analyzed by scanning electron microscope, energy dispersive X-ray spectroscopy and X-ray diffraction techniques, respectively. Scanning electron microscope analysis reveals the formation of laser-induced periodic surface structures (LIPSS), cavities, hillocks in both ambient environments (vacuum, oxygen). Cone-formation on the top of wave like ridges is observed under vacuum condition. In case of oxygen only redeposition is observed. Energy dispersive X-ray spectroscopy analysis exhibits that there is variation in chemical composition in both environments. When the target is treated in oxygen environment enhancement of the surface oxygen content is observed. X-ray diffraction exhibits that no new phases are formed under vacuum condition but a phase change in oxygen ambient is observed. For various fluences the variation in the peak intensity, crystallinity and d-spacing is observed under both ambient conditions.

  7. The Effect of Excimer Laser Treatment on the Surface Roughness and Fracture Strength of Alumina Substrates

    SciTech Connect

    Smoot, J.E.


    The microelectronics industry requires alumina substrates with exceptionally smooth surfaces and few surface defects to allow successful deposition of metallic films for reliable electronic performance. Irradiation by a 248-nm wavelength excimer laser beam (KrF) at a fluence of 125 mJ/mm{sup 2} and at various angles of incidence is shown to significantly reduce the surface roughness of alumina substrates. However, irradiation also creates a fine particulate deposit of alumina that only partially adheres to the substrate and impedes deposition of metal films. Annealing in air between 1350 C and 1450 C was found to remove the particles by sintering. As-received material showed surface roughness average (R{sub a}) mean values of 457 nm, which was reduced to 60 nm (mean) following irradiation and 71 nm (mean) following irradiation and annealing at 1350 C. Irradiation also produced a decrease in the number and severity of surface defects. The flexural strength and Weibull modulus were both increased by laser irradiation and thermal treatment. Flexural strength went from an as-received value of 450 MPa to 560 MPa following irradiation/sintering, measured at 10% probability of failure. The Weibull modulus was increased from the as-received value of about 9, to about 13 following irradiation/sintering. It was concluded that irradiation at an angle of incidence of 60{degree} from perpendicular was most effective in producing a low surface roughness.

  8. Multilevel diffractive optical element manufacture by excimer laser ablation and halftone masks

    NASA Astrophysics Data System (ADS)

    Quentel, Francois; Fieret, Jim; Holmes, Andrew S.; Paineau, Sylvain


    A novel method is presented to manufacture multilevel diffractive optical elements (DOEs) in polymer by single- step KrF excimer laser ablation using a halftone mask. The DOEs have a typical pixel dimension of 5 micrometers and are up to 512 by 512 pixels in size. The DOEs presented are Fresnel lenses and Fourier computer generated holograms, calculated by means of a conventional iterative Fourier transform algorithm. The halftone mask is built up as an array of 5 micrometers -square pixels, each containing a rectangular or L- shaped window on an opaque background. The mask is imaged onto the polymer with a 5x, 0.13 NA reduction lens. The pixels are not resolved by the lens, so they behave simply as attenuators, allowing spatial variation of the ablation rate via the window size. The advantages of halftone mask technology over other methods, such as pixel-by-pixel ablation and multi-mask overlay, are that it is very fast regardless of DOE size, and that no high-precision motion stages and alignment are required. The challenges are that the halftone mask is specific to the etch curve of the polymer used, that precise calibration of each grey-level is required, and that the halftone mask must be calculated specifically for the imaging lens used. This paper describes the design procedures for multilevel DOEs and halftone masks, the calibration of the various levels, and some preliminary DOE test results.

  9. Unique capabilities for ICF and HEDP research with the KrF laser

    NASA Astrophysics Data System (ADS)

    Obenschain, Stephen; Bates, Jason; Chan, Lop-Yung; Karasik, Max; Kehne, David; Sethian, John; Serlin, Victor; Weaver, James; Oh, Jaechul; Jenkins, Bruce; Lehmberg, Robert; Hegeler, Frank; Terrell, Stephen; Aglitskiy, Yefim; Schmitt, Andrew


    The krypton-fluoride (KrF) laser provides the shortest wavelength, broadest bandwidth and most uniform target illumination of all developed high-energy lasers. For directly driven targets these characteristics result in higher and more uniform ablation pressures as well as higher intensity thresholds for laser-plasma instability. The ISI beam smoothing scheme implemented on the NRL Nike KrF facility allows easy implementation of focal zooming where the laser radial profile is varied during the laser pulse. The capability for near continuous zooming with KrF would be valuable towards minimizing the effects of cross beam energy transport (CBET) in directly driven capsule implosions. The broad bandwidth ISI beam smoothing that is utilized with the Nike KrF facility may further inhibit certain laser plasma instability. In this presentation we will summarize our current understanding of laser target interaction with the KrF laser and the benefits it provides for ICF and certain HEDP experiments. Status and progress in high-energy KrF laser technology will also be discussed. Work supported by the Deparment of Energy, NNSA.

  10. Excimer laser photorefractive surgery of the cornea

    NASA Astrophysics Data System (ADS)

    Gaster, Ronald N.


    The 193 nm argon fluoride (ArF) excimer laser can effectively be used to change the radius of curvature of the cornea and thus alter the refractive state of the eye. This change allows myopic (nearsighted) patients to see well with less dependence on glasses or contact lenses. The two major techniques of laser refractive surgery currently in effect in the United States are photorefractive keratectomy (PRK) and laser in situ keratomileusis (LASIK). This paper will discuss these refractive cornea surgical techniques.

  11. Percutaneous angioscopy after excimer laser angioplasty

    NASA Astrophysics Data System (ADS)

    Nakamura, Fumitaka; Kvasnicka, Jan; Geschwind, Herbert J.; Uchida, Yasumi


    Angioscopy has proved to provide more detailed information on lesion morphology before and after interventional procedures than angiography. Therefore, to evaluate the effects of laser angioplasty, angioscopy was performed in five patients with peripheral or coronary vascular disease who underwent excimer laser angioplasty. The excimer laser was operated at 308 nm, 135 nsec, 25 Hz, and 40 - 60 mJ/mm2 and was coupled into multifiber wire-guided catheters of 1.4 to 2.0 mm diameter for coronary lesions and 2.2 mm for peripheral lesions. There were three coronary (one left anterior descending, one circumflex, one right coronary artery) and two peripheral (one common iliac artery, one superficial femoral artery) lesions. Angioscopy was successfully performed before and after laser ablation without any complications in all five lesions. The characteristics of angioscopic findings after excimer laser angioplasty consisted of flaps, fractures of plaques, and abundant tissue remnants. There was no apparent thermal injury. Recanalized channels were small and irregular. These results indicate that (1) angioscopy is effective and safe for evaluation of lesion morphology after laser angioplasty, (2) laser ablation does not result in thermal injury, and (3) irregular channels after recanalization and abundant tissue remnants may explain the suboptimal results after laser angioplasty.

  12. High-power, highly stable KrF laser with a 4-kHz pulse repetition rate

    NASA Astrophysics Data System (ADS)

    Borisov, V. M.; El'tsov, A. V.; Khristoforov, O. B.


    An electric-discharge KrF laser (248 nm) with an average output power of 300 W is developed and studied. A number of new design features are related to the use of a laser chamber based on an Al2O3 ceramic tube. A high power and pulse repetition rate are achieved by using a volume discharge with lateral preionisation by the UV radiation of a creeping discharge in the form of a homogeneous plasma sheet on the surface of a plane sapphire plate. Various generators for pumping the laser are studied. The maximum laser efficiency is 3.1%, the maximum laser energy is 160 mJ pulse-1, and the pulse duration at half maximum is 7.5 ns. In the case of long-term operation at a pulse repetition rate of 4 kHz and an output power of 300 W, high stability of laser output energy (σ <= 0.7%) is achieved using an all-solid-state pump system.

  13. Human excimer laser corneal surgery: preliminary report.

    PubMed Central

    L'Esperance, F A; Taylor, D M; Del Pero, R A; Roberts, A; Gigstad, J; Stokes, M T; Warner, J W; Telfair, W B; Martin, C A; Yoder, P R


    The first human trial utilizing the argon fluoride excimer laser at 193 nm to produce a superficial keratectomy in ten human eyes has been described with the histopathological evaluation of four eyes and the longer gross appearance of six eyes at intervals extending to 10 months post-excimer laser treatment. The process of laser superficial keratectomy has proved to be one of the promising areas of surgical intervention for reconstructive or refractive keratoplasty in the future. Intensive investigations need to be undertaken on the corneal wound healing process following laser ablation as well as the nature, and long-term stability of the corneal excisions or induced refractive corrections. It is essential that the optimal laser parameters be established for the various refractive corrections and other corneal surgical techniques, and that pathophysiologic and histopathologic changes that have been induced by the excimer laser-corneal tissue interaction in animals and humans be critically and extensively analyzed. Images FIGURE 1 FIGURE 19 A FIGURE 19 B FIGURE 20 A FIGURE 20 B FIGURE 21 A FIGURE 21 B FIGURE 22 A FIGURE 22 B FIGURE 23 FIGURE 24 FIGURE 25 FIGURE 26 FIGURE 27 FIGURE 28 FIGURE 29 A FIGURE 29 B FIGURE 29 C FIGURE 29 D FIGURE 30 A FIGURE 30 B FIGURE 31 A FIGURE 31 B FIGURE 32 FIGURE 33 FIGURE 34 FIGURE 35 FIGURE 36 FIGURE 37 A FIGURE 37 B FIGURE 37 C FIGURE 38 A FIGURE 38 B FIGURE 39 A FIGURE 39 B FIGURE 39 C FIGURE 40 A FIGURE 40 B PMID:2979049

  14. Optical Pattern Generator Using Excimer Laser

    NASA Astrophysics Data System (ADS)

    Hafner, Bernhard F.


    Reticles (masks on enlarged scale) are needed for optical pattern transfer in the production of integrated semiconductor circuits. In order to meet present requirements for 5X reticles only a direct writing technique is feasible. This means direct exposing of photoresist either with light or an electron beam. Many of todays highly dense reticles require some 10 5 to 10 6 discrete exposures when generated with an optical pattern generator. Optical pattern generators normally use mercury arc lamps to expose positive photoresist, which in turn need 200 milliseconds for each of these discrete exposures, thus requiring to stop the table at every exposure position ("stop and go" mode). This results in running times of several days per reticle. Therefore most reticles are nowadays being manufactured with very expensive e-beam machines. In the early 80's we started the first experiments to expose photoresist with an excimer laser. In order to obtain the maximum gain in speed, the goal was to operate with only one excimer laser pulse per exposure, so that a fast "flash on the fly" operation with an optical pattern generator became true. Equipping a conventional optical pattern generator with an excimer laser as the light source, it has become possible to expose substrates coated with standard photoresist in the "flash on the fly" mode with only 13 nanoseconds per flash. So the thruput could be increased up to 25 times in comparison to a pattern generator equipped with a mercury lamp. A comparison of both operation modes will show that an immense increase of speed is possible, even when a ten years old M3600 pattern generator is used. This system is in function now with very high reliability since more than three years in our IC development line.

  15. Selective area in situ conversion of Si (0 0 1) hydrophobic to hydrophilic surface by excimer laser irradiation in hydrogen peroxide

    NASA Astrophysics Data System (ADS)

    Liu, Neng; Huang, Xiaohuan; Dubowski, Jan J.


    We report on a method of rapid conversion of a hydrophobic to hydrophilic state of an Si (0 0 1) surface irradiated with a relatively low number of pulses of an excimer laser. Hydrophilic Si (0 0 1), characterized by the surface contact angle (CA) of near 15°, is fabricated following irradiation with either KrF or ArF excimer lasers of hydrophobic samples (CA ˜ 75°) immersed in a 0.01% H2O2/H2O solution. The chemical and structural analysis carried with x-ray photoelectron spectroscopy and atomic force microscopy measurements confirmed the formation of OH-terminated Si (0 0 1) surface with no detectable change in the surface morphology of the laser-irradiated material. To investigate the efficiency of this laser-induced hydrophilization process, we demonstrate a selective area immobilization of biotin-conjugated fluorescein-stained nanospheres outside of the laser-irradiated area. The results demonstrate the potential of the method for the fabrication of biosensing architectures and advancements of the Si-based microfluidic device technology.

  16. Excimer laser machining of optical fiber taps

    NASA Astrophysics Data System (ADS)

    Coyle, Richard J.; Serafino, Anthony J.; Grimes, Gary J.; Bortolini, James R.


    Precision openings for construction of an optical backplane have been machined in an optical fiber using an excimer laser operating at a wavelength of 193 nm. The openings were made by imaging the laser beam onto the polymer fiber cladding with a telescope, then ablating the cladding with a sufficient number of pulses to expose the core. Circular openings measuring 250 and 625 microns and elliptical openings measuring 650 X 350 microns have been made in the cladding of a 1 mm polymer-clad silica fiber. Examination by scanning electron microscopy reveals that the best quality openings are obtained with either the smaller circular geometry or the elliptical geometry. For various reasons, elliptical openings, with the major axis oriented along the longitudinal axis of the fiber, appear more suitable for tap construction. Individual optical fiber taps have been constructed by attaching a tap fiber to a laser machined opening in a central fiber using an ultraviolet-curable acralate. Individual tap measurements were made on the elliptical and the 250 micron circular openings. In addition, a triple tap assembly was made using elliptical tap openings. These results indicate that the excimer laser machining technique may be applicable to the construction of a linear tapped bus for optical backplanes.

  17. Matrix metalloproteinase expression in excimer laser wounded rabbit corneas

    NASA Astrophysics Data System (ADS)

    Hahn, Taewon; Chamon, Wallace; Akova, Yonja; Stark, Walter J.; Stetler-Stevenson, William G.; Azar, Dimitri T.


    This study was performed to obtain information about matrix metalloproteinase (MMP) expression in excimer-wounded corneas and to determine whether MMPs expression correlates with the depth of the ablation. 6-mm excimer keratectomy (60 or 180 micrometers ) was performed using the 193-mm ArF excimer laser on 12 NZW rabbits. Corneas treated with mechanical epithelial debridement and untreated corneas served as controls. Rabbits were killed at 20 and 30 hr after laser ablation. Zymography after SDS extraction was performed on regenerated central epithelium and the central stroma to determine MMPs expression. We observed enzymatic activity of a 92 KDa band in the epithelium of excimer-ablated corneas but not in that following debridement wounds and untreated controls. The expression of the 92 KDa MMP was most pronounced with the deeper excimer ablation. A 72 KDa band of enzymatic activity present in the stroma of all treated and control eyes was also seen in the epithelium of excimer-ablated corneas. These proteolytic enzymes may play an important role in wound healing and remodelling after excimer keratectomy.

  18. Excimer laser annealing for low-voltage power MOSFET

    NASA Astrophysics Data System (ADS)

    Chen, Yi; Okada, Tatsuya; Noguchi, Takashi; Mazzamuto, Fulvio; Huet, Karim


    Excimer laser annealing of lumped beam was performed to form the P-base junction for high-performance low-voltage-power MOSFET. An equivalent shallow-junction structure for the P-base junction with a uniform impurity distribution is realized by adopting excimer laser annealing (ELA). The impurity distribution in the P-base junction can be controlled precisely by the irradiated pulse energy density and the number of shots of excimer laser. High impurity activation for the shallow junction has been confirmed in the melted phase. The application of the laser annealing technology in the fabrication process of a practical low-voltage trench gate MOSFET was also examined.

  19. Magnetic and crystallographic properties of Co-Cr-(Ta,Pt)/Cr films deposited by excimer laser ablation

    NASA Astrophysics Data System (ADS)

    Ishikawa, A.; Tanahashi, K.; Yahisa, Y.; Hosoe, Y.; Shiroishi, Y.


    The crystal structure and magnetic properties of Co-alloy films deposited by KrF excimer laser ablation were investigated. A pulsed laser beam with wavelength of 248 nm was focused onto the deposition targets which were fixed in the vacuum chamber. Cr underlayer and Co-alloy films were successively deposited at a rate of 0.012 nm/pulse. The film surface was microscopically smooth compared to the sputtered films. This may be due to the low shadowing effect during the laser deposition. The composition of the film was reproducibly controlled, though there was a slight difference between the composition of film and target material. The coercivities of Co-Cr-Pt/Cr films formed on the Si and Ni-P substrates at 250 °C were 130 and 220 Oe, which were about one-fifth of the coercivity of sputtered films. Crystallographic analyses showed that Cr underlayer had no crystal orientation, and Co-alloy film consisted of fine fcc-type crystal grains. Low coercivity of the laser-deposited film is probably due to the lack of hcp Co phase.

  20. Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing

    NASA Astrophysics Data System (ADS)

    Sanza, F. J.; Laguna, M. F.; Casquel, R.; Holgado, M.; Barrios, C. A.; Ortega, F. J.; López-Romero, D.; García-Ballesteros, J. J.; Bañuls, M. J.; Maquieira, A.; Puchades, R.


    Cost-effective SU-8 micro-structures on a silicon substrate were developed using 248 nm excimer laser KrF projection, studying the influence of the different variables on the final pattern geometry, finding out that the most critical are exposure dose and post-bake condition. Also a novel and cost effective type of photomask based on commercial polyimide Kapton produced by 355 nm DPSS laser microprocessing was developed, studying the influence of the cutting conditions on the photomask. Finally, as a likely application the biosensing capability with a standard BSA/antiBSA immunoassay over a 10 × 10 micro-plates square lattice of around 10 μm in diameter, 15 μm of spacing and 400 nm in height was demonstrated, finding a limit of detection (LOD) of 33.4 ng/ml which is in the order of magnitude of bioapplications such as detection of cortisol hormone or insulin-like growth factor. Low cost fabrication and vertical interrogation characterization techniques lead to a promising future in the biosensing technology field.

  1. Permanent excimer superstructures by supramolecular networking of metal quantum clusters.


    Santiago-Gonzalez, Beatriz; Monguzzi, Angelo; Azpiroz, Jon Mikel; Prato, Mirko; Erratico, Silvia; Campione, Marcello; Lorenzi, Roberto; Pedrini, Jacopo; Santambrogio, Carlo; Torrente, Yvan; De Angelis, Filippo; Meinardi, Francesco; Brovelli, Sergio


    Excimers are evanescent quasi-particles that typically form during collisional intermolecular interactions and exist exclusively for their excited-state lifetime. We exploited the distinctive structure of metal quantum clusters to fabricate permanent excimer-like colloidal superstructures made of ground-state noninteracting gold cores, held together by a network of hydrogen bonds between their capping ligands. This previously unknown aggregation state of matter, studied through spectroscopic experiments and ab initio calculations, conveys the photophysics of excimers into stable nanoparticles, which overcome the intrinsic limitation of excimers in single-particle applications-that is, their nearly zero formation probability in ultra-diluted solutions. In vitro experiments demonstrate the suitability of the superstructures as nonresonant intracellular probes and further reveal their ability to scavenge reactive oxygen species, which enhances their potential as anticytotoxic agents for biomedical applications. PMID:27493181

  2. Permanent excimer superstructures by supramolecular networking of metal quantum clusters

    NASA Astrophysics Data System (ADS)

    Santiago-Gonzalez, Beatriz; Monguzzi, Angelo; Azpiroz, Jon Mikel; Prato, Mirko; Erratico, Silvia; Campione, Marcello; Lorenzi, Roberto; Pedrini, Jacopo; Santambrogio, Carlo; Torrente, Yvan; De Angelis, Filippo; Meinardi, Francesco; Brovelli, Sergio


    Excimers are evanescent quasi-particles that typically form during collisional intermolecular interactions and exist exclusively for their excited-state lifetime. We exploited the distinctive structure of metal quantum clusters to fabricate permanent excimer-like colloidal superstructures made of ground-state noninteracting gold cores, held together by a network of hydrogen bonds between their capping ligands. This previously unknown aggregation state of matter, studied through spectroscopic experiments and ab initio calculations, conveys the photophysics of excimers into stable nanoparticles, which overcome the intrinsic limitation of excimers in single-particle applications—that is, their nearly zero formation probability in ultra-diluted solutions. In vitro experiments demonstrate the suitability of the superstructures as nonresonant intracellular probes and further reveal their ability to scavenge reactive oxygen species, which enhances their potential as anticytotoxic agents for biomedical applications.

  3. Sub-megajoule high performance KrF direct-drive target designs

    NASA Astrophysics Data System (ADS)

    Colombant, Denis; Gardner, J. H.; Afeyan, B. B.; Manheimer, W.


    In direct-drive ICF, the intensity on target has historically been kept lower than about 10^15/cm^2 to avoid potential laser plasma instabilities. However, because of the I 2̂ scaling of most of the laser plasma instabilities, the KrF laser at 248 nm has a factor of 2 advantage over its closest competitor, the third harmonic of Nd glass laser light (351 nm). In addition, the smaller wavelength of KrF gives higher collisional absorption and the > 1 THz bandwidth is advantageous for both beam smoothing and instability suppression. The laser architecture makes it easy to zoom the focal spot to follow an imploding pellet and thereby increase absorption efficiency. The purpose of this paper is to investigate what can be gained in terms of performance and hydrodynamic stability by making use of the factor of 2 in laser intensity, as well as zooming. Our preliminary results indicate that KrF allows substantial reductions in the laser energy required for ignition while maintaining moderate gains. Target designs will be presented showing how the trade-off between gain and hydrodynamic stability is altered by using the advantages of KrF.

  4. KrF laser amplifier with phase-conjugate Brillouin retroreflectors.


    Gower, M C


    We have demonstrated the use of phase-conjugate stimulated Brillouin scattering mirrors to produce high-quality, short-pulse KrF laser beams from angular multiplexed and regenerative amplifiers. The mirror was also shown to isolate systems optically from amplifier spontaneous emission. Automatic alignment of targets using this mirror as a retroreflector was also demonstrated. PMID:19714043

  5. Near-field nonuniformities in angularly multiplexed KrF fusion lasers with induced spatial incoherence

    NASA Astrophysics Data System (ADS)

    Lehmberg, Robert H.; Chan, Yung


    Induced spatial incoherence (ISI) has been proposed for KrF laser drivers to achieve the high degree of spatial beam uniformity required for direct-drive inertial confinement fusion. Although ISI provides ultrasmooth illumination at the far field of the laser, where the target is located, it can still allow the beams in the quasi-near field to develop a time-averaged spatial structure. This speckle, which arises primarily from random-phase aberration, builds up as the laser beams propagate away from the pupil plane located at the final amplifier stage; it is distinct from any structure imposed by gain nonuniformities in the amplifiers. Because of the spatial incoherence, the speckle is significantly smaller than that experienced by coherent beams. Nevertheless, it remains a damage issue, especially for the long beam delay paths required in angularly multiplexed KrF lasers. We develop a novel algorithm for calculating the time-integrated intensities; compare simulations and measurements of the near-field speckle in the Nike KrF laser; and explore options, such as aberration reduction and optical relaying, for controlling the problem in future angularly multiplexed KrF drivers. © Optical Society of America

  6. Repetitively pulsed, high energy KrF lasers for inertial fusion energy

    NASA Astrophysics Data System (ADS)

    Myers, M. C.; Sethian, J. D.; Giuliani, J. L.; Lehmberg, R.; Kepple, P.; Wolford, M. F.; Hegeler, F.; Friedman, M.; Jones, T. C.; Swanekamp, S. B.; Weidenheimer, D.; Rose, D.


    Krypton fluoride (KrF) lasers produce highly uniform beams at 248 nm, allow the capability of 'zooming' the spot size to follow an imploding pellet, naturally assume a modular architecture and have been developed into a pulsed-power-based industrial technology that readily scales to a fusion power plant sized system. There are two main challenges for the fusion power plant application: to develop a system with an overall efficiency of greater than 6% (based on target gains of 100) and to achieve a durability of greater than 3 × 108 shots (two years at 5 Hz). These two issues are being addressed with the Electra (700 J, 5 Hz) and Nike (3000 J, single shot) KrF lasers at the Naval Research Laboratory. Based on recent advances in pulsed power, electron beam generation and transport, hibachi (foil support structure) design and KrF physics, wall plug efficiencies of greater than 7% should be achievable. Moreover, recent experiments show that it may be possible to realize long lived electron beam diodes using ceramic honeycomb cathodes and anode foils that are convectively cooled by periodically deflecting the laser gas. This paper is a summary of the progress in the development of the critical KrF technologies for laser fusion energy.

  7. Excimer laser ceramic and metal surface alloying applications

    NASA Astrophysics Data System (ADS)

    Hontzopoulos, E.; Zervaki, A.; Zergioti, Y.; Hourdakis, G.; Raptakis, E.; Giannacopoulos, A.; Fotakis, C.


    Recent excimer laser based deposition and surface modification techniques for ceramic and metallurgical engineering applications are reported. These include the improvement of the anti-corrosion and erosion properties and wear resistance of metal alloys and the formation of surface conducting patterns on ceramic materials. Excimer laser chemical vapour deposition (LCVD) applications B, AI and Hf or multielement combinations are discussed together with studies which aim at a better understanding of the fundamental processes governing the deposition process.

  8. Concentration, temperature, and density in a hydrogen-air flame by excimer-induced Raman scattering

    NASA Technical Reports Server (NTRS)

    Wehrmeyer, Joseph A.; Bowling, John M.; Pitz, Robert W.


    Single-pulse, vibrational Raman scattering (VRS) is an attractive laser diagnostic for the study of supersonic hydrogen-air combustion. The VRS technique gives a complete thermodynamic description of the gas mixture at a point in the reacting flow. Single-pulse, vibrational Raman scattering can simultaneously provide independent measurements of density, temperature, and concentration of each major species (H2, H2O, O2 and N2) in a hydrogen/air turbulent combustor. Also the pressure can be calculated using the ideal gas law. However, single-pulse VRS systems in current use for measurement of turbulent combustion have a number of shortcomings when applied to supersonic flows: (1) slow repetition rate (1 to 5 Hz), (2) poor spatial resolution (0.5x0.3x0.3 cu mm), and (3) marginal time resolution. Most of these shortcomings are due to the use of visible wavelength flash-lamp pumped dye lasers. The advent of UV excimer laser allows the possibility of dramatic improvements in the single-pulse, vibrational Raman scattering. The excimer based VRS probe will greatly improve repetition rate (100 to 500 Hz), spatial resolution (0.1x0.1x0.1 cu mm) and time resolution (30ns). These improvements result from the lower divergence of the UV excimer, higher repetition rate, and the increased Raman cross-sections (15 to 20 times higher) at ultra-violet (UV) wavelengths. With this increased capability, single-pulse vibrational Raman scattering promises to be an ideal non-intrusive probe for the study of hypersonic propulsion flows.

  9. Efficient gas lasers pumped by generators with inductive energy storage

    NASA Astrophysics Data System (ADS)

    Tarasenko, Victor F.; Panchenko, Alexei N.; Tel'minov, Alexei E.


    Laser and discharge parameters in mixtures of rare gases with halogens driven by a pre-pulse-sustainer circuit technique are studied. Inductive energy storage with semiconductor opening switch was used for the high-voltage pre-pulse formation. It was shown that the pre-pulse with a high amplitude and short rise-time along with sharp increase of discharge current and uniform UV- and x-ray preionization allow to form long-lived stable discharge in halogen containing gas mixtures. Improvement of both pulse duration and output energy was achieved for XeCl-, XeF-, KrCl- and KrF excimer lasers. Maximal laser output was as high as 1 J at efficiency up to 4%. Increase both of the radiation power and laser pulse duration were achieved in N2-NF3 (SF6) and He-F2 (NF3) gas mixtures, as well.

  10. Photo-triggering and secondary electron produced ionization in electric discharge ArF* excimer lasers

    NASA Astrophysics Data System (ADS)

    Xiong, Zhongmin; Kushner, Mark J.


    Electric discharge excimer lasers are sustained in multi-atmosphere attaching gas mixtures that are typically preionized to enable a reproducible, uniform glow, which maximizes optical quality and gain. This preionization is often accomplished using UV light produced by a corona discharge within the plasma cavity. To quantify the relationship between corona discharge properties and those of the laser discharge, the triggering of electron avalanche by preionizing UV light in an electric discharge-pumped ArF* excimer laser was numerically investigated using a two-dimensional model. The preionizing UV fluxes were generated by a corona-bar discharge driven by the same voltage pulse as the main discharge sustained in a multi-atmospheric Ne/Ar/Xe/F2 gas mixture. The resulting peak photo-electron density in the inter-electrode spacing is around 108 cm-3, and its distribution is biased toward the UV source. The preionization density increases with increasing dielectric constant and capacitance of the corona bar. The symmetry and uniformity of the discharge are, however, improved significantly once the main avalanche develops. In addition to bulk electron impact ionization, the ionization generated by sheath accelerated secondary electrons was found to be important in sustaining the discharge current at experimentally observed values. At peak current, the magnitude of the ionization by sheath accelerated electrons is comparable to that from bulk electron impact in the vicinity of the cathode.

  11. The development and progress of XeCl Excimer laser system

    NASA Astrophysics Data System (ADS)

    Zhang, Yongsheng; Ma, Lianying; Wang, Dahui; Zhao, Xueqing; Zhu, Yongxiang; Hu, Yun; Qian, Hang; Shao, Bibo; Yi, Aiping; Liu, Jingru


    A large angularly multiplexed XeCl Excimer laser system is under development at the Northwest Institute of Nuclear Technology (NINT). It is designed to explore the technical issues of uniform and controllable target illumination. Short wavelength, uniform and controllable target illumination is the fundamental requirement of high energy density physics research using large laser facility. With broadband, extended light source and multi-beam overlapping techniques, rare gas halide Excimer laser facility will provide uniform target illumination theoretically. Angular multiplexing and image relay techniques are briefly reviewed and some of the limitations are examined to put it more practical. The system consists of a commercial oscillator front end, three gas discharge amplifiers, two electron beam pumped amplifiers and the optics required to relay, encode and decode the laser beam. An 18 lens array targeting optics direct and focus the laser in the vacuum target chamber. The system is operational and currently undergoing tests. The total 18 beams output energy is more than 100J and the pulse width is 7ns (FWHM), the intensities on the target will exceed 1013W/cm2. The aberration of off-axis imaging optics at main amplifier should be minimized to improve the final image quality at the target. Automatic computer controlled alignment of the whole system is vital to efficiency and stability of the laser system, an array of automatic alignment model is under test and will be incorporated in the system soon.

  12. Spectroscopic study of rare-gas excimer formation in a direct-current discharge with supersonic expansion

    NASA Astrophysics Data System (ADS)

    Kiik, M. J.; Dubé, P.; Stoicheff, B. P.


    Emission spectra of the rare-gas excimers Ar2*, Kr2*, and Xe2* were excited in a dc jet discharge with supersonic expansion. Absorption and fluorescence emission measurements provided atomic population densities for levels of the 1s manifold. Changes in intensities of the atomic resonance lines and the VUV bands were examined as the plasma was irradiated with laser radiation tuned to specific atomic transitions between levels of the 1s and 2p manifolds. This technique of optical pumping has established that excimers in the A 3Σ+u state are the main contributors to the observed bands from this source. Rate equations were developed to explain the observed intensity changes. Comparisons of the calculated and observed changes indicated that population mixing amongst levels of the 1s manifold caused by electron collisions is an important process in regulating the population in the 1s5 atomic level that leads to the formation of rare-gas excimers by collisions with ground level atoms.

  13. Ablation with a single micropatterned KrF laser pulse: quantitative evidence of transient liquid microflow driven by the plume pressure gradient at the surface of polyesters

    NASA Astrophysics Data System (ADS)

    Weisbuch, F.; Tokarev, V. N.; Lazare, S.; Débarre, D.

    A microscopic flow of a transient liquid film produced by KrF laser ablation is evidenced on targets of PET and PEN. Experiments were done by using single pulses of the excimer laser beam micropatterned with the aid of submicron projection optics and grating masks. The samples of various crystalline states, ablated with a grating-forming beam (period Λ=3.7 μm), were precisely measured by atomic force microscopy, in order to evidence any deviation from the ablation behavior predicted by the current theory (combination of ablation curve and beam profile). This was confirmed by comparing various behaviors dependent on the polymer nature (PC, PET and PEN). PC is a normally ablating polymer in the sense that the ablated profile can be predicted with previous theory neglecting liquid-flow effects. This case is called `dry' ablation and PC is used as a reference material. But, for some particular samples like crystalline PET, it is revealed that during ablation a film of transient liquid, composed of various components, which are discussed, can flow under the transient action of the gradient of the pressure of the ablation plume and resolidify at the border of the spot after the end of the pulse. This mechanism is further supported by a hydrodynamics theoretical model in which a laser-induced viscosity drop and the gradient of the plume pressure play an important role. The volume of displaced liquid increases with fluence (0.5 to 2 J/cm2) and satisfactory quantitative agreement is obtained with the present model. The same experiment done on the same PET polymer but prepared in the amorphous state does not show microflow, and such an amorphous sample behaves like the reference PC (`dry' ablation). The reasons for this surprising result are discussed.

  14. The excimer laser: science fiction fantasy or practical tool?


    Biamino, Giancarlo


    Nearly 20 years ago, in vitro experiments left no doubt about the fact that laser light can ablate atherosclerotic plaque. The initial enthusiastic results with the technology, particularly in coronary arteries, were followed by reports showing unacceptably high restenosis and complication rates. These poor results were due to the premature application of an underdeveloped technology, a lack of understanding of laser/tissue interaction, and the use of incorrect lasing techniques. Consequently, and without discrimination, all lasers were banned from the catheterization laboratories for nearly a decade. Technological enhancements of the excimer laser, combined with refined catheter lasing techniques, resulted in greater debulking of atherosclerotic material in long superficial femoral artery occlusions. These results triggered the application of the excimer laser technique as an atherectomy tool in more complex lesions below the knee. The multicenter Laser Atherectomy for Critical Ischemia study clearly demonstrated that the excimer laser technology resulted in limb salvage rates >90% in patients with critical limb ischemia (CLI). Furthermore, new clinical results indicate that the excimer laser is very effective in dissolving thrombotic obstructions, redirecting this technology to the coronary field. The results of the excimer laser in CLI validate the role of the cool laser in treating complex peripheral vascular disease. The results suggest a larger indication for this technology and support a more aggressive use of these interventional techniques in the treatment of this large patient cohort. However, all lasers are not equally effective in debulking atherosclerotic material. Only the athermic process associated with the excimer laser produces a safe and effective endovascular ablation of obstructive atherosclerotic and/or thrombotic material. The appropriate and safe utilization of the equipment and lasing techniques, combined with correct indications and

  15. The Excimer Laser: Its Impact on Science and Industry

    NASA Astrophysics Data System (ADS)

    Basting, Dirk


    After the laser was demonstrated in 1960, 15 years were required to develop a practical method for extending laser emission into the UV: the Excimer laser. This historical review will describe the challenges with the new medium and provide an insight into the technological achievements. In the transition from Science to Industry it will be shown how start-ups successfully commercialized laboratory prototypes. The pioneers in this rapidly expanding field will be identified and the influence of government-funded research as well as the role of venture capital will be discussed. In scientific applications, the fields of photochemistry and material research were particularly stimulated by the advent of a reliable UV light source. Numerous industrial applications and worldwide research in novel applications were fueled In the early and mid 80's by progress in excimer laser performance and technology. The discovery of ablative photocomposition of polymer materials by Srinivasan at IBM opened the door to a multitude of important excimer applications. Micromachining with extreme precision with an excimer laser enabled the success of the inkjet printer business. Biological materials such as the human cornea can also be ``machined'' at 193nm, as proposed in 1983 by Trokel and Srinivasan. This provided the foundation of a new medical technology and an industry relying on the excimer laser to perform refractive surgery to correct vision Today, by far the largest use of the excimer laser is in photolithography to manufacture semiconductor chips, an application discovered by Jain at IBM in the early 80's. Moore's law of shrinking the size of the structure to multiply the number of transistors on a chip could not have held true for so long without the deep UV excimer laser as a light source. The presentation will conclude with comments on the most recent applications and latest market trends.

  16. Calcified lesion modeling for excimer laser ablation

    NASA Astrophysics Data System (ADS)

    Scott, Holly A.; Archuleta, Andrew; Splinter, Robert


    Objective: Develop a representative calcium target model to evaluate penetration of calcified plaque lesions during atherectomy procedures using 308 nm Excimer laser ablation. Materials and Methods: An in-vitro model representing human calcified plaque was analyzed using Plaster-of-Paris and cement based composite materials as well as a fibrinogen model. The materials were tested for mechanical consistency. The most likely candidate(s) resulting from initial mechanical and chemical screening was submitted for ablation testing. The penetration rate of specific multi-fiber catheter designs and a single fiber probe was obtained and compared to that in human cadaver calcified plaque. The effects of lasing parameters and catheter tip design on penetration speed in a representative calcified model were verified against the results in human cadaver specimens. Results: In Plaster of Paris, the best penetration was obtained using the single fiber tip configuration operating at 100 Fluence, 120 Hz. Calcified human lesions are twice as hard, twice as elastic as and much more complex than Plaster of Paris. Penetration of human calcified specimens was highly inconsistent and varied significantly from specimen to specimen and within individual specimens. Conclusions: Although Plaster of Paris demonstrated predictable increases in penetration with higher energy density and repetition rate, it can not be considered a totally representative laser ablation model for calcified lesions. This is in part due to the more heterogeneous nature and higher density composition of cadaver intravascular human calcified occlusions. Further testing will require a more representative model of human calcified lesions.

  17. Excimer laser ablation of the lens.


    Nanevicz, T M; Prince, M R; Gawande, A A; Puliafito, C A


    Ablation of the bovine crystalline lens was studied using radiation from an excimer laser at four ultraviolet wave lengths as follows: 193 nm (argon fluoride), 248 nm (krypton fluoride), 308 nm (xenon chloride), and 351 nm (xenon fluoride). The ablation process was quantitated by measuring mass ablated with an electronic balance, and characterized by examining ablation craters with scanning electron microscopy. The highest ablation rate was observed at 248 nm with lower rates at 193 and 308 nm. No ablation was observed at 351 nm. Scanning electron microscopy revealed the smoothest craters at 193 nm while at 248 nm there was vacuolization in the crater walls and greater disruption of surrounding tissue. The craters made at 308 nm did not have as smooth a contour as the 193-nm lesions. The spectral absorbance of the bovine lens was calculated at the wavelengths used for ablation and correlated with ablation rates and thresholds. High peak-power, pulsed ultraviolet laser radiation may have a role in surgical removal of the lens. PMID:3789982

  18. Neutron detection by scintillation of noble-gas excimers

    NASA Astrophysics Data System (ADS)

    McComb, Jacob Collin

    Neutron detection is a technique essential to homeland security, nuclear reactor instrumentation, neutron diffraction science, oil-well logging, particle physics and radiation safety. The current shortage of helium-3, the neutron absorber used in most gas-filled proportional counters, has created a strong incentive to develop alternate methods of neutron detection. Excimer-based neutron detection (END) provides an alternative with many attractive properties. Like proportional counters, END relies on the conversion of a neutron into energetic charged particles, through an exothermic capture reaction with a neutron absorbing nucleus (10B, 6Li, 3He). As charged particles from these reactions lose energy in a surrounding gas, they cause electron excitation and ionization. Whereas most gas-filled detectors collect ionized charge to form a signal, END depends on the formation of diatomic noble-gas excimers (Ar*2, Kr*2,Xe* 2) . Upon decaying, excimers emit far-ultraviolet (FUV) photons, which may be collected by a photomultiplier tube or other photon detector. This phenomenon provides a means of neutron detection with a number of advantages over traditional methods. This thesis investigates excimer scintillation yield from the heavy noble gases following the boron-neutron capture reaction in 10B thin-film targets. Additionally, the thesis examines noble-gas excimer lifetimes with relationship to gas type and gas pressure. Experimental data were collected both at the National Institute of Standards and Technology (NIST) Center for Neutron Research, and on a newly developed neutron beamline at the Maryland University Training Reactor. The components of the experiment were calibrated at NIST and the University of Maryland, using FUV synchrotron radiation, neutron imaging, and foil activation techniques, among others. Computer modeling was employed to simulate charged-particle transport and excimer photon emission within the experimental apparatus. The observed excimer

  19. KrF laser cost/performance model for ICF commercial applications

    SciTech Connect

    Harris, D.B.; Pendergrass, J.H.


    Simple expressions suitable for use in commercial-applications plant parameter studies for the direct capital cost plus indirect field costs and for the efficiency as a function of repetition rate were developed for pure-optical-compression KrF laser fusion drivers. These simple expressions summarize estimates obtained from detailed cost-performance studies incorporating recent results of ongoing physics, design, and cost studies. Contributions of KrF laser capital charges and D and M costs to total levelized constant-dollar (1984) unit ICF power generation cost are estimated as a function of plant size and driver pulse energy using a published gain for short-wavelength lasers and representative values of plant parameters.

  20. Lithography process for KrF in the sub-0.11 μm node

    NASA Astrophysics Data System (ADS)

    Yuhang, Zhao; Jun, Zhu; Jiarong, Tong; Xuan, Zeng


    Currently, 200 mm wafer foundry companies are beginning to explore production feasibility under ground rules smaller than 0.11 μm while maintain the cost advantages of KrF exposure tool systems. The k1 factor under 0.11 μm at 248 nm illumination will be below 0.35, which means the process complexity is comparable with 65 nm at 193 nm illumination. In this paper, we present our initial study in the CD process window, mask error factor and CD through pitch performance at the 0.09 μm ground rule for three critical layers—gate poly, metal and contact. The wafer data in the process window and optical proximity will be analyzed. Based on the result, it is shown that the KrF tool is fully capable of sub 0.11 μm node mass production.

  1. Excimer laser processing of backside-illuminated CCDS

    NASA Technical Reports Server (NTRS)

    Russell, S. D.


    An excimer laser is used to activate previously implanted dopants on the backside of a backside-illuminated CCD. The controlled ion implantation of the backside and subsequent thin layer heating and recrystallization by the short wavelength pulsed excimer laser simultaneously activates the dopant and anneals out implant damage. This improves the dark current response, repairs defective pixels and improves spectral response. This process heats a very thin layer of the material to high temperatures on a nanosecond time scale while the bulk of the delicate CCD substrate remains at low temperature. Excimer laser processing backside-illuminated CCD's enables salvage and utilization of otherwise nonfunctional components by bringing their dark current response to within an acceptable range. This process is particularly useful for solid state imaging detectors used in commercial, scientific and government applications requiring a wide spectral response and low light level detection.

  2. Development of KrF hybrid resist for a dual-isolation application

    NASA Astrophysics Data System (ADS)

    Liu, Sen; Holmes, Steven; Chen, Kuang Jung; Huang, Wu-song; Kwong, Ranee; Breyta, Greg; Doris, Bruce; Cheng, Kangguo; Luning, Scott; Vinet, Maud; Grenouillet, Laurent; Liu, Qing; Colburn, Matt; Wu, Chung-Hsi


    As an option to traditional positive or negative photoresist, hybrid resist has been developed to provide an alternative way to create small trench features, at the range of 20-60 nm, by generating with a single expose, with both positive and negative responses to TMAH developer in one resist layer. [1] Here we report the design and development of a series of frequency-doubling KrF hybrid resists for an Extremely Thin Silicon on Insulator (ETSOI) dual-isolation application for 20 nm node and beyond. The resist formulations were optimized in terms of photo-acid generators (PAGs), PAG loading level and polymers. The resulting KrF hybrid resists are compatible with conventional KrF lithography processes, including conventional illumination, binary masks and 0.26 N TMAH developer, to afford a spacewidth of 20-60 nm. The space CD can be controlled by means of formulation and process options, but is insensitive to expose dose and mask CD. On integrated wafers, the hybrid resists have demonstrated good lithography performance, including through-pitch CD uniformity, focus/expose process window, profile, LER and RIE behavior. This hybrid resist process has been used to fabricate initial development structures for high performance dual-isolation ETSOI devices.

  3. Improved corrosion resistance of excimer laser treated stainless steel

    NASA Astrophysics Data System (ADS)

    Emmel, A.; Schubert, Emil; Barnikel, J.; Stiele, H. J.; Bergmann, Hans W.


    Excimer laser surface processing is well-known for material ablation, cleaning, deoxidation, smoothing or roughening. A typical industrial application is the polymer ablation for electronic components, however, the treatment of metals is only on the threshold of industrial use. A novel application reported here, may be an excimer treatment in air leading to oxide and nitrogen dissolution, resulting in an improved corrosion resistance. It is known from literature that corrosion resistance can be enhanced by laser surface alloying e.g. gas nitriding of Ti using CO2-lasers. However, all these techniques have the disadvantage of producing inhomogeneous layers. The aim of this study was to use the reactions during excimer laser irradiation of steel in air to produce layers in the thickness range of 0,1 to 2 micrometers with novel properties. Using the Siemens XP2020 excimer laser it was possible to scan technologically reasonable surface areas with energy densities in the range of 20 to 80 mJ/mm2 and several pulses per area. Steel sheets of 1.4541 (DIN) were irradiated in air and subsequently analyzed by XRD, SEM, TEM, AES and Mossbauer spectroscopy. The corrosion behavior was tested potentio-dynamically in 0,5 N H2SO4 and by gravimetric measurements of the weight loss. The XRD results showed, that the remaining delta-ferrite was eliminated. Both Mossbauer and Auger spectroscopy indicated a strong N- dissolution, hereby stabilizing the austenite. The TEM-investigations revealed fine dispersed oxides (chromites) and an increased dislocation density, resulting in pre-cellular arrangements after relaxation. Corrosion tests suggested the reduction of the material removal rates by a factor of 10 compared to untreated samples. The U(i) curves showed that after the excimer treatment less Cr is presented due to oxide formation in the surface layer. These Cr-oxides are the main reason for the improved corrosion resistance of excimer laser treated stainless steel.

  4. Theory of optical excitation spectra and depolarization dynamics in bilayer WS2 from the viewpoint of excimers

    NASA Astrophysics Data System (ADS)

    Yu, T.; Wu, M. W.


    We investigate the optical excitation spectra and the photoluminescence depolarization dynamics in bilayer WS2. A different understanding of the optical excitation spectra in the recent photoluminescence experiment by Zhu et al. (arXiv:1403.6224) in bilayer WS2 is proposed. In the experiment, four excitations (1.68, 1.93, 1.99, and 2.37 eV) are observed and identified to be the indirect exciton for the Γ valley, trion, A exciton, and B exciton excitations, respectively, with the redshift for the A exciton energy measured to be 30˜50 meV when the sample synthesized from monolayer to bilayer. According to our study, by considering that there exist both the intralayer and charge-transfer excitons in the bilayer WS2, with interlayer hopping of the hole, there exists an excimer state composed by the superposition of the intralayer and charge-transfer exciton states. Accordingly, we show that the four optical excitations in the bilayer WS2 are the A charge-transfer exciton, A' excimer, B' excimer, and B intralayer exciton states, respectively, with the calculated resonance energies showing good agreement with the experiment. In our picture, the speculated indirect exciton, which involves a high-order phonon absorption/emission process, is not necessary. Furthermore, the binding energy for the excimer state is calculated to be 40 meV, providing reasonable explanation for the experimentally observed energy redshift of the A exciton. Based on the excimer states, we further derive the exchange interaction Hamiltonian. Then the photoluminescence depolarization dynamics due to the electron-hole exchange interaction is studied in the pump-probe setup by the kinetic spin Bloch equations. We find that there is always a residual photoluminescence polarization that is exactly half of the initial one, lasting for an infinitely long time, which is robust against the initial energy broadening and strength of the momentum scattering. This large steady-state photoluminescence

  5. Advances in 193 nm excimer lasers for mass spectrometry applications

    NASA Astrophysics Data System (ADS)

    Delmdahl, Ralph; Esser, Hans-Gerd; Bonati, Guido


    Ongoing progress in mass analysis applications such as laser ablation inductively coupled mass spectrometry of solid samples and ultraviolet photoionization mediated sequencing of peptides and proteins is to a large extent driven by ultrashort wavelength excimer lasers at 193 nm. This paper will introduce the latest improvements achieved in the development of compact high repetition rate excimer lasers and elaborate on the impact on mass spectrometry instrumentation. Various performance and lifetime measurements obtained in a long-term endurance test over the course of 18 months will be shown and discussed in view of the laser source requirements of different mass spectrometry tasks. These sampling type applications are served by excimer lasers delivering pulsed 193 nm output of several mJ as well as fast repetition rates which are already approaching one Kilohertz. In order to open up the pathway from the laboratory to broader market industrial use, sufficient component lifetimes and long-term stable performance behavior have to be ensured. The obtained long-term results which will be presented are based on diverse 193 nm excimer laser tube improvements aiming at e.g. optimizing the gas flow dynamics and have extended the operational life the laser tube for the first time over several billion pulses even under high duty-cycle conditions.

  6. XeCl excimer laser excited by longitudinal discharge

    SciTech Connect

    Zhou, Z.; Zeng, Y.; Qiu, M.


    XeCl excimer laser excited by longitudinal gas discharge is reported. The main characteristics of the laser output and the laser energy in dependence of the operating parameters were measured. The laser pulse duration was 35 ns and the maximum laser energy 317 with improvement by preionization.

  7. Surface treatment of metals with excimer and CO2 lasers

    NASA Astrophysics Data System (ADS)

    Haidemenopoulos, G. N.; Zervaki, A.; Papadimitriou, K.; Tsipas, D. N.; McIntosh, J.; Zergioti, G.; Manousaki, G.; Hontzopoulos, Elias I.


    The availability of a variety of lasers including the high-power cw CO2 lasers, the pulsed- mode infrared Nd-YAG, and the pulsed-mode ultraviolet excimer laser has led to the development of many interesting applications of laser technology to materials processing. Among them the surface modification of metallic alloys appears to be one of the most important and very close to implementation in various industries. Specifically the applications of excimer lasers have been discussed in a recent workshop in the framework of the Eureka EU 205 program. The major topics concerned with surface modifications that were discussed in this workshop were surface smoothing and roughening, surface cleaning of Ti and Cu, mixing and interdiffusion of predeposited layers, surface irradiation of Cu-alloys to improve the corrosion resistance, surface remelting of Al-alloys for grain refinement through rapid solidification, and surface remelting of Ni-P electroless coatings on Al alloys for the improvement of corrosion resistance. Laser alloying of Ni-base superalloys has also been discussed. Applications discussed here include the surface treatment of Ni-base superalloys with high-power CO2 laser, the surface treatment of aluminum alloys with excimer lasers, the laser assisted chemical vapor deposition (LCVD) of wear and corrosion resistant layers of Ti, TiC, and TiN on tool steels, and the fracture surface sulphur printing with excimer lasers.

  8. Novel technique for high-quality microstructuring with excimer lasers

    NASA Astrophysics Data System (ADS)

    Roth, Stephan; Geiger, Manfred


    Laser micromachining has become increasingly established in many microsystem applications during the past years. These new fields occasion higher demands on the quality of micromachiend devices combined with high resolution and working velocity. Due to the disadvantages of conventional excimer laser processing, a novel technique is required to meet these demands. The main problems of conventional excimer laser machining are the redeposition of ablated material on the irradiated work piece and the formation of a strong melting phase especially for metals. These difficulties greatly reduce the applicability of excimer laser material processing for manufacturing microsystems technology components. By applying a thin water film to the substrate surface, the redeposition of ablated material can be completely avoided, which results in a better quality of the microstructures. Usage of a water film, however, has proved to lead to a marked reduction of the ablation rate for the examined materials - ceramics and stainless steel. Therefore, one of the objectives of future research will be to raise the ablation rate in order to render excimer laser processing more interesting economically. Adding alcoholic additives, among others, has improved the wetting of the liquid films on the surface. The effect of the modified chemical composition of the liquid on ablation rate and structure quality for various materials is presented here.

  9. Analysis of glycosaminoglycans in rabbit cornea after excimer laser keratectomy

    PubMed Central

    Kato, T.; Nakayasu, K.; Ikegami, K.; Obara, T.; Kanayama, T.; Kanai, A.


    BACKGROUND/AIMS—The biochemical basis for the development of subepithelial opacity of the cornea after excimer laser keratectomy has yet to be fully defined. The aim of this study was to evaluate the alterations of glycosaminoglycans (GAGs) after excimer laser keratectomy.
METHODS—Rabbit corneas were harvested on days 5, 10, 20, and 30 after excimer laser photoablation. The amount of main disaccharide units was determined by high performance liquid chromatography (HPLC). In addition, immunohistochemical studies were performed on corneal sections 20 days after the ablation.
RESULTS—The concentrations of ΔDi-0S at 5 and 10 days were significantly lower than before the ablation. ΔDi-6S showed a significant increase 5 days after the ablation but ΔDi-4S did not show any significant change. There was a significant increase in ΔDi-HA at 20 and 30 days after ablation. In immunohistochemistry, the positive staining for ΔDi-6S and hyaluronic acid was observed in the subepithelial region. These immunohistochemical results were well correlated with the HPLC findings.
CONCLUSIONS—The increase in chondroitin-6 sulphate and hyaluronic acid may be related to corneal subepithelial opacity after excimer laser keratectomy.


  10. Electrical properties of Sb-doped epitaxial SnO2 thin films prepared using excimer-laser-assisted metal-organic deposition

    NASA Astrophysics Data System (ADS)

    Tsuchiya, Tetsuo; Nakajima, Tomohiko; Shinoda, Kentaro


    Excimer-laser-assisted metal-organic deposition (ELAMOD) was used to prepare Sb-doped epitaxial (001) SnO2 thin films on (001) TiO2 substrates at room temperature. The effects of laser fluence, the number of shots with the laser, and Sb content on the electrical properties such as resistivity, carrier concentration, and carrier mobility of the films were investigated. The resistivity of the Sb-doped epitaxial (001) SnO2 thin film prepared using an ArF laser was lower than that of the film prepared using a KrF laser. The van der Pauw method was used to measure the resistivity, carrier concentration, and carrier mobility of the Sb-doped epitaxial (001) SnO2 thin films in order to determine the effect of Sb content on the electrical resistivity of the films. The lowest resistivity obtained for the Sb-doped epitaxial (001) SnO2 thin films prepared using ELAMOD with the ArF laser and 2 % Sb content was 2.5 × 10-3 Ω cm. The difference between the optimal Sb concentrations and resistivities of the films produced using either ELAMOD or conventional thermal MOD was discussed.

  11. Effect of excimer laser annealing on a-InGaZnO thin-film transistors passivated by solution-processed hybrid passivation layers

    NASA Astrophysics Data System (ADS)

    Bermundo, Juan Paolo; Ishikawa, Yasuaki; Fujii, Mami N.; Nonaka, Toshiaki; Ishihara, Ryoichi; Ikenoue, Hiroshi; Uraoka, Yukiharu


    We demonstrate the use of excimer laser annealing (ELA) as a low temperature annealing alternative to anneal amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) passivated by a solution-processed hybrid passivation layer. Usually, a-IGZO is annealed using thermal annealing at high temperatures of up to 400 °C. As an alternative to high temperature thermal annealing, two types of ELA, XeCl (308 nm) and KrF (248 nm) ELA, are introduced. Both ELA types enhanced the electrical characteristics of a-IGZO TFTs leading to a mobility improvement of ~13 cm2 V-1 s-1 and small threshold voltage which varied from ~0-3 V. Furthermore, two-dimensional heat simulation using COMSOL Multiphysics was used to identify possible degradation sites, analyse laser heat localization, and confirm that the substrate temperature is below 50 °C. The two-dimensional heat simulation showed that the substrate temperature remained at very low temperatures, less than 30 °C, during ELA. This implies that any flexible material can be used as the substrate. These results demonstrate the large potential of ELA as a low temperature annealing alternative for already-passivated a-IGZO TFTs.

  12. Comparison study for sub-0.13-μm lithography between ArF and KrF lithography

    NASA Astrophysics Data System (ADS)

    Kim, Seok-Kyun; Kim, YoungSik; Kim, Jin-Soo; Bok, Cheol-Kyu; Ham, Young-Mog; Baik, Ki-Ho


    In this paper we investigated the feasibility of printing sub-0.13 micrometers device patterns with ArF and KrF lithography by using experiment and simulation. To do this we evaluated various cell structures with different sizes from 0.26 micrometers to 0.20 micrometers pitch. In experiment 0.60NA ArF and 0.70NA KrF exposure tools, commercial and in house resists and bottom anti-reflective coating (BARC) materials are used. To predict and compare with experimental data we also used our developed simulation tool HOST base don diffused aerial iamge model. We found that ArF lithography performance is a little bit better than KrF and therefore 0.70NA KrF lithography can be used up to 0.12 micrometers design rule device and 0.60NA ArF lithography can be used up to 0.11 micrometers . But to get more than 10 percent expose latitude, 0.13 micrometers with KrF and 0.12 micrometers with ArF are the minimum design rule size. However to obtain process margin we had to use extreme off-axis illumination (OAI) which results in large isolated- dense bias and poor linearity including isolated pattern. Using higher NA can reduce ID bias and mask error factor. For contact hole it is more effective to use KrF lithography because resist thermal flow process can be used to shrink C/H size. Our developed ArF resist and BARC shows good performance and we can reduce k1 value up to 0.34. Through this study we verified again that ArF lithography can be applied for sub-0.13 micrometers device through sub-0.10 micrometers with high contrast resist and 0.75NA exposure tool.

  13. APPLICATIONS OF LASERS AND OTHER TOPICS IN QUANTUM ELECTRONICS: Laser system based on a commercial microwave oscillator with time compression of a microwave pump pulse

    NASA Astrophysics Data System (ADS)

    Arteev, M. S.; Vaulin, V. A.; Slinko, V. N.; Chumerin, P. Yu; Yushkov, Yu G.


    An analysis is made of the possibility of using a commercial microsecond microwave oscillator, supplemented by a device for time compression of microwave pulses, in pumping of industrial lasers with a high efficiency of conversion of the pump source energy into laser radiation. The results are reported of preliminary experiments on the commissioning of an excimer XeCl laser.

  14. Excimer laser coronary angioplasty: relative risk analysis of clinical results

    NASA Astrophysics Data System (ADS)

    Bittl, John A.


    Reports of successful use of excimer laser coronary angioplasty for complex coronary artery disease abound, yet firm indications for its use have not been defined. We attempted to treat 858 coronary stenoses in 764 consecutive patients (mean age 61 years; range 32 - 91 years; 75% men; 76% with Class III or IV angina) with excimer laser angioplasty at 308 nm. Successful treatment was achieved in 86% of patients, as indicated by excimer laser angioplasty, we used relative risk analysis. This showed that certain angiographic features, such as lesions at a vessel bifurcation (odds ratio, OR equals 0.46; 95% confidence interval 0.23, 0.88; P equals 0.017;) or in a tortuous segment (OR equals 0.54; 95% CI equals 0.34, 0.88; P equals 0.041), have decreased likelihood of clinical success. On the other hand, ostial stenoses (OR equals 1.06; 95% CI equals 0.44, 2.56, P equals 0.903) and saphenous vein graft lesions (OR equals 2.17; 95% CI equals 0.98, 4.82; P equals 0.051) have acceptable success rates. Diffuse disease (> 20 mm), total occlusions and calcified lesions were treated as successfully as all other lesion types. Successful treatment with excimer laser coronary angioplasty was also achieved in almost all patients (15/16) who had a prior unsuccessful attempt at balloon angioplasty in the lesion was crossed with a guidewire yet resists either balloon catheter passage or full dilatation. Follow-up angiography was obtained in 70% of eligible patients. Angiographic restenosis, defined by > 50% stenosis, was seen in 60% of patients. Relative risk analysis showed an increased risk of restenosis when adjunctive balloon angioplasty was not used (OR equals 1.68; 95% CI equals 1.02, 2.28; P equals 0.039). Other variables known to affect the outcome of balloon angioplasty, such as lesion length or stenosis in degenerated saphenous vein bypass graft, did not influence the

  15. Cross-shaped photoluminescence of excimers in perylene crystals

    NASA Astrophysics Data System (ADS)

    Tanaka, Daichi; Numata, Yudai; Nakagawa, Kazuya; Kobayashi, Takayoshi; Tokunaga, Eiji


    Cross-shaped excimer (self-trapped exciton) luminescence from α- and β-perylene single crystals of 50-100 μm was found when they were excited at the center of the crystals with a continuous-wave (cw) laser resonant with the exciton absorption. The cross shape is formed by the two lines which intersect at the excited position and are perpendicular to the sides of the crystals of parallelogram shape. Luminescence is emitted from the excited spot and 4 side edges in the cross shape. The most striking feature is that the luminescence intensity at the edges was as high as or higher than at the excited spot. The possibility of the exciton propagation or the waveguide effect is rejected both experimentally and theoretically. This phenomenon can be reasonably explained only when the radiative transition probability of excimers is significantly enhanced at the crystals side edges than at the center due to the lower symmetry.

  16. Triggering Excimer Lasers by Photoionization from Corona Discharges

    NASA Astrophysics Data System (ADS)

    Xiong, Zhongmin; Duffey, Thomas; Brown, Daniel; Kushner, Mark


    High repetition rate ArF (192 nm) excimer lasers are used for photolithography sources in microelectronics fabrication. In highly attaching gas mixtures, preionization is critical to obtaining stable, reproducible glow discharges. Photoionization from a separate corona discharge is one technique for preionization which triggers the subsequent electron avalanche between the main electrodes. Photoionization triggering of an ArF excimer laser sustained in multi-atmosphere Ne/Ar/F2/Xe gas mixtures has been investigated using a 2-dimensional plasma hydrodynamics model including radiation transport. Continuity equations for charged and neutral species, and Poisson's equation are solved coincident with the electron temperature with transport coefficients obtained from solutions of Boltzmann's equation. Photoionizing radiation is produced by a surface discharge which propagates along a corona-bar located adjacent to the discharge electrodes. The consequences of pulse power waveform, corona bar location, capacitance and gas mixture on uniformity, symmetry and gain of the avalanche discharge will be discussed.

  17. Cross-shaped photoluminescence of excimers in perylene crystals

    NASA Astrophysics Data System (ADS)

    Tanaka, Daichi; Numata, Yudai; Nakagawa, Kazuya; Kobayashi, Takayoshi; Tokunaga, Eiji


    Cross-shaped excimer (self-trapped exciton) luminescence from α- and β-perylene single crystals of 50-100 μm was found when they were excited at the center of the crystals with a continuous-wave (cw) laser resonant with the exciton absorption. The cross shape is formed by the two lines which intersect at the excited position and are perpendicular to the sides of the crystals of parallelogram shape. Luminescence is emitted from the excited spot and 4 side edges in the cross shape. The most striking feature is that the luminescence intensity at the edges was as high as or higher than at the excited spot. The possibility of the exciton propagation or the waveguide effect is rejected both experimentally and theoretically. This phenomenon can be reasonably explained only when the radiative transition probability of excimers is significantly enhanced at the crystals side edges than at the center due to the lower symmetry.

  18. Excimer laser interaction with dentin of the human tooth

    NASA Technical Reports Server (NTRS)

    Hammond, Ernest C., Jr.; Gilliam, Ruth L.; Baker, George R.


    The use an excimer laser produced many unusual conical structures within the dentin of the inner part of the human tooth. By varying the frequency of the laser one can disperse the energy and cause more bleeding in laser surgery, but not destroy the cells associated with the incision. Therefore, the healing process will virtually be without scarring. Whereas, using the infrared laser the blood loss would be less, but the healing process would tend to be longer because cells are being destroyed due to the cauterization effect of the laser. The question is, are these structures produced as an interaction with the laser or are they an intrinsic part of the structure. The effects of the laser interaction upon dentin was studied, and in using electron microscopy the interaction of the excimer laser upon the tooth dentin and other various biological tissue is more clearly understood.

  19. Bandwidth Dependence of Laser Plasma Instabilities Driven by the Nike KrF Laser

    NASA Astrophysics Data System (ADS)

    Weaver, J. L.; Oh, J.; Seely, J.; Kehne, D.; Brown, C. M.; Obenschain, S.; Serlin, V.; Schmitt, A. J.; Phillips, L.; Lehmberg, R. H.; McLean, E.; Manka, C.; Feldman, U.


    The Nike krypton-fluoride (KrF) laser at the Naval Research Laboratory operates in the deep UV (248 nm) and employs beam smoothing by induced spatial incoherence (ISI). In the first ISI studies at longer wavelengths (1054 nm and 527 nm) [Obenschain, PRL 62, 768(1989);Mostovych, PRL, 59, 1193(1987); Peyser, Phys. Fluids B 3, 1479(1991)], stimulated Raman scattering, stimulated Brillouin scattering, and the two plasmon decay instability were reduced when wide bandwidth ISI (δν / ν ~ 0.03-0.19%) pulses irradiated targets at moderate to high intensities (1014-1015W/cm2) . Recent Nike work showed that the threshold for quarter critical instabilities increased with the expected wavelength scaling, without accounting for the large bandwidth (δν ~ 1-3 THz). New experiments will compare laser plasma instabilities (LPI) driven by narrower bandwidth pulses to those observed with the standard operation. The bandwidth of KrF lasers can be reduced by adding narrow filters (etalons or gratings) in the initial stages of the laser. This talk will discuss the method used to narrow the output spectrum of Nike, the laser performance for this new operating mode, and target observations of LPI in planar CH targets. Work supported by DoE/NNSA.

  20. Measurements of low-level prepulse on Nike KrF laser

    NASA Astrophysics Data System (ADS)

    Karasik, Max; Mostovych, A. N.; Lehmberg, R. H.; Chan, Y.; Weaver, J. L.; Obenschain, S. P.


    The krypton fluoride (KrF) laser is a leading candidate driver for inertial fusion energy. Some of the current fusion target designs call for targets with thin metallic coatings. These targets could be particularly susceptible to preheat by a low-level laser prepulse. Knowledge of the prepulse can be important in understanding and modeling the behavior of such targets. This paper presents measurements of low-level prepulse on target with the Nike KrF laser. Sources of prepulse are discussed and measurements are performed under several specific laser conditions in order to evaluate the relative contribution of these sources to the overall prepulse. Prepulse is found to be ˜2×10-7 from peak intensity for approximately 120ns prior to the main laser pulse. Prepulse energy density on target is ˜2J/cm2. The first laser amplifier in the time- and angle-multiplexed section of the laser is found to be the dominant source of prepulse.

  1. Conceptual design of a KrF scaling module. Final report

    SciTech Connect


    A conceptual design of an angular multiplexed 50 kJ KrF laser module for Inertial Confinement Fusion is presented. Optical designs for encoding, beam packing and beam transfer between amplifier stages are developed; emphasis is placed on reducing prepulse problems and achieving acceptable optical quality. An axisymmetric optical design is identified as optimum in terms of simplicity, optical quality, cost and alignment. A kinetic code model was developed for the KrF amplifier and was used to derive scaling maps for the 50 kJ module. Attention was given to reducing parasitics, achieving acceptable extraction efficiency and accounting for amplified spontaneous emission effects. The size of the module is constrained by parasitic suppression and damage thresholds; the power gain is constrained by demanding 40% extraction efficiency in a double pass extraction geometry; and, the run time is constrained by the pulsed power technology (PFN or PFL) and acceptable values of g/sub 0/L. The bounds imposed on the design by the pulsed power technology were examined. Both PFLs and PFNs were considered along with their associated diode, hibachi and guide field requirements. A base line design for a 50 kJ module including amplifier staging, layout and overall size is discussed. Cost analysis and scaling for optical components, pulsed power technology and the guide field are also presented.

  2. Novel routes toward sub-70-nm contact windows by using new KrF photoresist

    NASA Astrophysics Data System (ADS)

    Kim, Jin-Soo; Koh, Cha-Won; Lee, Geunsu; Jung, Jae Chang; Shin, Ki-Soo


    To overcome C/H(contact holes) shrinkage limitation of Resist Flow Process (RFP), we investigated and analyzed the tendency of the shrink bias according to the baking temperature and other process factors. Based on this basic test, we found that the shrink bias for the baking temperature could be modeled on the simple linear function. And also we estimated new Hotplate to improve CD uniformity after the resist flow and evaluated newly developed photoresist (New Resist) for the stable C/H shrinkage. In this study, we could recognize that CD uniformity after the resist flow was very dependent on actual temperature uniformity of Hotplate. Actually New Hotplate, which was superior to normal Hotplate, showed good CD uniformity (16nm) at the strong brink bias(140nm). On the other hand, the C/H shrinkage of New Resist was more stable than those of normal KrF Resists and its C/H profiles could not be severely deformed at even high baking temperature to shrink Sub-70nm C/H from original C/H(200nm). Based on these results, the progressive Resist Flow Process in KrF lithography will be a very robust candidate at even high gigabit generation devices.

  3. 308-nm Excimer laser treatment of palmoplantar psoriasis.


    Goldberg, David J; Chwalek, Jennifer; Hussain, Mussarrat


    Psoriasis is a chronic inflammatory condition affecting 1-3% of the population. The incidence of palmoplantar involvement has been estimated to be between 2.8% and 40.9%. Significant psychosocial distress and difficulty performing activities of daily living can result. Treatment is often challenging. Traditional treatments include topical steroids, anthralin, calcipotriene, PUVA, methotrexate, cyclosporine, retinoids and biologics. In this case series, we report our success with the 308-nm excimer laser in the treatment of palmoplantar psoriasis. PMID:21401376

  4. Nebulae at keratoconus--the result after excimer laser removal.


    Fagerholm, P; Fitzsimmons, T; Ohman, L; Orndahl, M


    Ten patients underwent excimer laser ablation due to nebula formation at keratoconus. The nebulae interfered significantly with contact lens fit or wearing time. The mean follow-up time in these patients was 16.5 months. Following surgery all patients could be successfully fitted with a contact lens and thereby obtain good visual acuity. Furthermore, contact lens wearing time was 8 hours or more in all cases. In 2 patients the nebulae recurred but were successfully retreated. PMID:8154261

  5. Cleaning of large area by excimer laser ablation

    NASA Astrophysics Data System (ADS)

    Sentis, Marc L.; Delaporte, Philippe C.; Marine, Wladimir I.; Uteza, Olivier P.


    Surface removal technologies are being challenged from environmental and economic perspectives. This paper is concerned with laser ablation applied to large surface cleaning with an automatized excimer laser unit. The study focused on metallic surfaces that are oxidized and are representative of contaminated surfaces with radionuclides in a context of nuclear power plant maintenance. The whole system is described: laser, beam deliver, particle collection cell, real time control of cleaning processes. Results concerning surface laser interaction and substrate modifications are presented.

  6. Pulsed excimer laser processing for cost-effective solar cells

    NASA Technical Reports Server (NTRS)

    Wong, David C.


    The application of excimer laser in the fabrication of photovoltaic devices was investigated extensively. Processes included junction formation, laser assisted chemical vapor deposition metallization, and laser assisted chemical vapor deposition surface passivation. Results demonstrated that implementation of junction formation by laser annealing in production is feasible because of excellent control in junction depth and quality. Both metallization and surface passivation, however, were found impractical to be considered for manufacturing at this stage.

  7. Excimer laser ophthalmic surgery: evaluation of a new technology.

    PubMed Central

    Infeld, D. A.; O'Shea, J. G.


    The aim of this article is to provide information and an overview of the potential risks and benefits of excimer laser surgery, a new and promising technique in ophthalmic surgery. Although this review concentrates on the use of the laser for refractive purposes, novel therapeutic techniques are also discussed. It is hoped that this will enable general practitioners, optometrists and physicians to provide appropriate advice and counselling for patients. Images Figure 1 Figure 2 Figure 3 Figure 4 PMID:10211324

  8. Excimer ablation of human intervertebral disc at 308 nanometers.


    Wolgin, M; Finkenberg, J; Papaioannou, T; Segil, C; Soma, C; Grundfest, W


    Excimer laser energy, which has been shown to photoablate tissue at a precisely controllable rate with minimal thermal damage, was applied to human intervertebral disc in an effort to develop a technique for percutaneous discectomy. Cadaveric samples of human disc were used. Excimer laser energy was produced by a XeCl, magnetically switched, long-pulse laser working at 308 nm, 20 Hz. Annulus tissue of approximately 1 mm thickness was placed in contact with the output tip of a 400 microns core diameter quartz fiber, and measurements of ablation rate were made at different radiant exposures. Ablation rates were found to vary linearly with radiant exposure, from 0.7 micron/pulse at 10 mJ/mm2 to 11.0 microns/pulse at 55 mJ/mm2, with a correlation coefficient of 0.984. Threshold radiant exposure, calculated by extrapolation, was found to be about 7 mJ/mm2. Histologic analysis showed a minimum of thermal damage in these specimens, and when ablated with modification to maintain constant fiber-tissue contact, thermal injury was nearly absent, as compared to samples ablated with Nd:YAG through a contact probe. Thermographic analysis, performed using the AGA 782 Digital Thermography system, showed increasing temperature with increasing radiant exposure, with a maximum temperature of 47.2 degrees C at 55 mJ/mm2. In that precise tissue ablation was demonstrated with minimal generated heat, and excimer energy at 308 nm is transmissible through fiber optics, excimer holds great promise for the development of a percutaneous discectomy technique. PMID:2716456

  9. Excimer emission from pulsed microhollow cathode discharges in xenon

    SciTech Connect

    Lee, B.-J.; Nam, S. H.; Rahaman, H.; Iberler, M.; Jacoby, J.; Frank, K.


    Direct current (dc) microhollow cathode discharge (MHCD) is an intense source for excimer radiation in vacuum ultraviolet at a wavelength of 172 nm in a high pressure xenon (Xe) gas. The concentration of precursors for the excimer formation, i.e., excited and ionized gas atoms, increases significantly by applying high voltage pulse onto the dc MHCD over the pulse duration range from 20 to 100 ns. The intensity of the excimer emission for the voltage pulse of 20 ns duration exceeds that of the emission intensity obtained from the same MHCD operated only in the dc mode, by one order of magnitude. In addition, the emission intensity increases by one order of magnitude over the pulse duration range from 20 to 100 ns. It can be assumed that the emission intensity of the MHCD source increases as long as the duration of the high voltage pulse is shorter than the electron relaxation time. For the high voltage pulse of 100 ns duration, the emission intensity has been found to be further enhanced by a factor of three when the gas pressure is increased from 200 to 800 mbar.

  10. Assessment of the Suitability of Excimer Lasers in Treating Onychomycosis

    NASA Astrophysics Data System (ADS)

    Kymplová, Jaroslava; Jelínek, Miroslav; Urzová, Jana; Mikšovský, Jan; Dušek, Karel; Bauerová, Lenka


    Since it is known that UV-C radiation kills fungus, we wanted to verify the hypothesis that the use of excimer laser could be an alternative method for treating onychomycosis - nail fungus. The aim of the first stage of this work was to determine the transmission, reflection and absorption of nails. In the following stage we focused on irradiation of fungi. Our final task is to assess whether it is possible to determine the parameters of radiation (a total dose,a dose per pulse frequency, a repetition rate, a number of pulses) for which the elimination of fungi would be the most effective but without damaging the nail and soft tissue underneath it. The results so far have showed that UV-C radiation does not pass through a fingernail to such an extent that it could damage the soft tissue beneath it. Fungi are destroyed by the application of only small doses of radiation using the excimer laser. Additional measurements will be required to determine the modulation parameters of the excimer laser radiation for the treatment of onychomycosis.

  11. Gain enhancement in a XeCl-pumped Raman amplifier

    SciTech Connect

    Rifkin, J.; Bernt, M.L.; MacPherson, D.C.; Carlsten, J.L.


    A comparison of the theoretical predictions of a multimode broadband model with the experimentally measured gain enhancement in a Raman amplifier is presented. The results show that the multimode theory with fixed and totally random phases is in agreement with the data obtained from an excimer-laser-pumped Raman amplifier. Additionally, this theory indicates that the correlated gain can be larger than the gain for a monochromatic laser, as might be expected for a model with amplitude modulation.

  12. 100 nm half-pitch double exposure KrF lithography using binary masks

    NASA Astrophysics Data System (ADS)

    Geisler, S.; Bauer, J.; Haak, U.; Stolarek, D.; Schulz, K.; Wolf, H.; Meier, W.; Trojahn, M.; Matthus, E.


    In this paper we investigate the process margin for the 100nm half - pitch double exposure KrF lithography using binary masks for different illumination settings. The application of Double Exposure Lithography (DEL) would enlarge the capability of 248 nm exposure technique to smaller pitch e.g. for the integration of dedicated layers into 0.13 μm BiCMOS with critical dimension (CD) requirements exceeding the standard 248 nm lithography specification. The DEL was carried out with a KrF Scanner (Nikon S207D, NA Lens = 0.82) for a critical dimension (CD) of 100nm half pitch. The chemical amplified positive resists SL4800 or UV2000 (Rohm & Haas) with a thickness of 325nm were coated on a 70 nm AR10L (Rohm & Haas) bottom anti-reflective coating (BARC). With a single exposure and using binary masks it is not possible to resolve 100nm lines with a pitch of 200 nm, due to the refraction and the resolution limit. First we investigated the effect of focus variation. It is shown that the focus difference of 1st and 2nd exposure is one critical parameter of the DEL. This requires a good focus repeatability of the scanner. The depth of focus (DOF) of 360 nm with the coherence parameter σ = 0.4 was achieved for DEL with SL4800 resist. The influence of the better resist resolution of UV2000 on the process window will be shown (DOF = 460 nm). If we change the focus of one of the exposures the CD and DOF performance of spaces is reduced with simultaneous line position changing. Second we investigated the effect of different illumination shapes and settings. The results for conventional illumination with different values for σ and annular illumination with σ inner = 0.57 and σ outer = 0.85 will be shown. In summary, the results show that DEL has the potential to be a practical lithography enhancement method for device fabrication using high NA KrF tool generation.



    Strickland, G.; Horn, F.L.; White, H.T.


    A pump which utilizes the fluid being pumped through it as its lubricating fluid is described. This is achieved by means of an improved bearing construction in a pump of the enclosed or canned rotor type. At the outlet end of the pump, adjacent to an impeller mechanism, there is a bypass which conveys some of the pumped fluid to a chamber at the inlet end of the pump. After this chamber becomes full, the pumped fluid passes through fixed orifices in the top of the chamber and exerts a thrust on the inlet end of the pump rotor. Lubrication of the rotor shaft is accomplished by passing the pumped fluid through a bypass at the outlet end of the rotor shaft. This bypass conveys Pumped fluid to a cooling means and then to grooves on the surface of the rotor shait, thus lubricating the shaft.

  14. Aurora project: optical design for a kilojoule class KrF laser

    SciTech Connect

    Hanlon, J.; McLeod, J.; Sollid, J.E.; Horn, W. III; Carmichael, R.; Kortegaard, B.; Woodfin, G.; Rosocha, L..


    Aurora is a 248-nm, 10-kilojoule laser system being built at Los Alamos National Laboratory to demonstrate the feasibility of large KrF laser systems for laser fusion. It was designed as a test bed to demonstrate: (1) efficiet energy extraction at 248 nm; (2) an angularly multiplexed optical system that is scaleable to large system designs; (3) the control of parasitics and ASE (amplified spontaneous emission); (4) long path pulse propagation at uv wavelengths; (5) alignment systems for multibeam systems; and (6) new or novel approaches to optical hardware that can lead to cost reduction on large systems. In this paper only issues pertinent to the optical system are addressed. First, a description of the entire system is given. The design constraints on the optical system are explained, concurrent with a discussion of the final design. This is followed by a very brief discussion of coatings; in particular, the use of sol-gels for antireflection coatings is presented.

  15. Industrial Pumps

    NASA Technical Reports Server (NTRS)


    A flow inducer is a device that increases the pump intake capacity of a Worthington Centrifugal pump. It lifts the suction pressure sufficiently for the rotating main impeller of the centrifugal pump to operate efficiently at higher fluid intake levels. The concept derives from 1960's NASA technology which was advanced by Worthington Pump Division. The pumps are used to recirculate wood molasses, a highly viscous substance.

  16. Possibilities for achieving x-ray lasing action by use of high-order multiphoton processes. [lambda = 10 nm

    SciTech Connect

    Clark, C.W.; Littman, M.G.; McIlrath, T.J.; Miles, R.; Skinner, C.H.; Suckewer, S.; Valeo, E.


    We consider some possible mechanisms for producing gain in the 10 nm spectral region. They involve the creation of a population inversion in a confined plasma column by selective excitation of multicharged ions via absorption of many (>10) ultraviolet photons. Specific treatment is made of Kr-like ions pumped by a KrF excimer laser. 27 refs., 5 figs.

  17. Pulse shaping and energy storage capabilities of angularly multiplexed KrF laser fusion drivers

    NASA Astrophysics Data System (ADS)

    Lehmberg, R. H.; Giuliani, J. L.; Schmitt, A. J.


    This paper describes a rep-rated multibeam KrF laser driver design for the 500kJ Inertial Fusion test Facility (FTF) recently proposed by NRL, then models its optical pulse shaping capabilities using the ORESTES laser kinetics code. It describes a stable and reliable iteration technique for calculating the required precompensated input pulse shape that will achieve the desired output shape, even when the amplifiers are heavily saturated. It also describes how this precompensation technique could be experimentally implemented in real time on a reprated laser system. The simulations show that this multibeam system can achieve a high fidelity pulse shaping capability, even for a high gain shock ignition pulse whose final spike requires output intensities much higher than the ˜4MW/cm2 saturation levels associated with quasi-cw operation; i.e., they show that KrF can act as a storage medium even for pulsewidths of ˜1ns. For the chosen pulse, which gives a predicted fusion energy gain of ˜120, the simulations predict the FTF can deliver a total on-target energy of 428kJ, a peak spike power of 385TW, and amplified spontaneous emission prepulse contrast ratios IASE/I<3×10-7 in intensity and FASE/F<1.5×10-5 in fluence. Finally, the paper proposes a front-end pulse shaping technique that combines an optical Kerr gate with cw 248nm light and a 1μm control beam shaped by advanced fiber optic technology, such as the one used in the National Ignition Facility (NIF) laser.

  18. Excimer laser superficial keratectomy for proud nebulae in keratoconus.

    PubMed Central

    Moodaley, L; Liu, C; Woodward, E G; O'Brart, D; Muir, M K; Buckley, R


    Contact lens intolerance in keratoconus may be due to the formation of a proud nebula at or near the apex of the cone. Excimer laser superficial keratectomy was performed as an outpatients with proud nebulae as treatment patients with proud nebulae as treatment for their contact lens intolerance. The mean period of contact lens wear before the development of intolerance was 13.4 years (range 2 to 27 years). Following the development of intolerance, three patients abandoned contact lens wear in the affected eye while the remainder experienced a reduction in comfortable wearing time (mean = 3.75 hours; range: 0-14 hours). All patients had good potential Snellen visual acuity with a contact lens of 6/9 (nine eyes) and 6/12 (one eye). The proud nebulae were directly ablated with a 193 nm ArF excimer laser using a 1 mm diameter beam. Between 100-150 pulses were sufficient to ablate the raised area. Patients experienced no pain during the procedure and reported minimal discomfort postoperatively. In all cases flattening of the proud nebulae was achieved. Seven patients were able to resume regular contact lens wear (mean wearing time = 10.17 hours; range 8 to 16 hours). In three patients, resumption of contact lens wear was unsuccessful because of cone steepness. All patients achieved postoperative Snellen visual acuity of 6/12 or better with a contact lens. Four patients experienced a loss of one line in Snellen acuity. The mean follow up period was 8.3 months (range 2 to 17 months). Excimer laser superficial keratectomy is a useful technique for the treatment of contact lens intolerance caused by proud nebulae in patients with keratoconus. Penetrating keratoplasty is thus avoided. Images PMID:8060928

  19. Excimer laser superficial keratectomy for proud nebulae in keratoconus.


    Moodaley, L; Liu, C; Woodward, E G; O'Brart, D; Muir, M K; Buckley, R


    Contact lens intolerance in keratoconus may be due to the formation of a proud nebula at or near the apex of the cone. Excimer laser superficial keratectomy was performed as an outpatients with proud nebulae as treatment patients with proud nebulae as treatment for their contact lens intolerance. The mean period of contact lens wear before the development of intolerance was 13.4 years (range 2 to 27 years). Following the development of intolerance, three patients abandoned contact lens wear in the affected eye while the remainder experienced a reduction in comfortable wearing time (mean = 3.75 hours; range: 0-14 hours). All patients had good potential Snellen visual acuity with a contact lens of 6/9 (nine eyes) and 6/12 (one eye). The proud nebulae were directly ablated with a 193 nm ArF excimer laser using a 1 mm diameter beam. Between 100-150 pulses were sufficient to ablate the raised area. Patients experienced no pain during the procedure and reported minimal discomfort postoperatively. In all cases flattening of the proud nebulae was achieved. Seven patients were able to resume regular contact lens wear (mean wearing time = 10.17 hours; range 8 to 16 hours). In three patients, resumption of contact lens wear was unsuccessful because of cone steepness. All patients achieved postoperative Snellen visual acuity of 6/12 or better with a contact lens. Four patients experienced a loss of one line in Snellen acuity. The mean follow up period was 8.3 months (range 2 to 17 months). Excimer laser superficial keratectomy is a useful technique for the treatment of contact lens intolerance caused by proud nebulae in patients with keratoconus. Penetrating keratoplasty is thus avoided. PMID:8060928

  20. Excimer laser photorefractive keratectomy with different ablation zones.


    Hassan, Z; Lampé, Z; Békési, L; Berta, A


    In this study we would like to introduce the excimer laser, and to demonstrate our results and complications by using different ablation zones during photorefractive keratectomy (PRK) in the correction of myopia and astigmatismus. In 1996 we performed photorefractive keratectomy on 100 myopic eyes of 52 patients (28 females, 24 males). Mean age was 26.21 years (ranged from 19 to 54 years). The preoperative refraction ranged from -1.0 D to -18.0 Diopters. The diameter of the ablation zones were between 5 and 6.5 mm. We evaluated the results and the complications of the surgeries of 100 eyes which were performed with Schwind keratom F excimer laser. After 2 days, 1 week, 1 month, 3 months, and 6 months postoperatively we tested the best uncorrected and corrected visual acuities, and performed intraocular pressure measurement, slit lamp examination as well as corneal topography. The postoperative refractions were between +/- 0.5 to +/- 1.0 Diopters. After six months postoperatively the slit lamp examination showed that 80% of the patients had no corneal haze while 20% had stage I (Hanna) corneal haze. The smaller the diameter of the ablation zone was, the more pronounced the corneal haze and the night-glare were. The photorefractive excimer laser keratectomy is judged to be a safe method, although it might have some side-effects. The different ablation zones of this treatment means an important modification, that not only allows the method to meet the individual requirements, but reduces the chance of the complications as well. Based on the authors' experiences PRK for moderate myopia with large diameter ablation zones appears more predictable than than with smaller ablation zone diameters. PMID:9408312

  1. Surface Structuring of CFRP by using Modern Excimer Laser Sources

    NASA Astrophysics Data System (ADS)

    Fischer, F.; Kreling, S.; Dilger, K.

    High demands for lightweight construction can be attained by the use of carbon fiber-reinforced plastics (CFRP) including one major challenge: the joining technology. Adhesive bonding may allow an increased utilization of the lightweight potential of CFRP. But this technology requires a surface pre-treatment because of residues of release agents. This paper describes surface pre-treatment of CFRP specimens by using modern excimer laser and the mechanical tests that compare the achieved strength to manually abraded ones. The laser process is suitable for achieving cohesive failure within the adhesive and bond strengths in the magnitude of the abraded specimen.

  2. Analytical Characterization of CFRP Laser Treated by Excimer Laser Radiation

    NASA Astrophysics Data System (ADS)

    Kreling, S.; Fischer, F.; Delmdahl, R.; Gäbler, F.; Dilger, K.

    Due to the increasing interest in lightweight structures, carbon-fiber reinforced plastics are increasingly applied, especially in the transportation industry. An interesting technology for joining these materials is adhesive bonding due to numerous advantages compared to conventional techniques like riveting. However, to achieve a strong and durable bond, surface pre-treatment is necessary to remove residues of release agents that are transferred to the surface during manufacturing. This paper describes analytical experiments, namely SEM and XPS, performed on CFRP surfaces pre-treated with 308 nm excimer laser radiation.

  3. Chemical surface modification of fluorocarbon polymers by excimer laser processing

    NASA Astrophysics Data System (ADS)

    Niino, Hiroyuki; Yabe, Akira


    Surface of poly(tetrafluoroethylene) [PTFE] film was modified chemically by an ArF excimer laser-induced reaction in a hydrazine gas atmosphere. The polymer surface modified upon the irradiation of 1000 pulses at 27 mJ cm -2, which was a fairly lower fluence than the ablation threshold for usual polymer films, showed hydrophilicity (contact angle for water: 30°) enough to be metallized by chemical plating. The mechanism for chemical surface modification was investigated by FTIR, XPS, and SIMS analyses. The laser-treated PTFE film was metallized by a chemical plating process. These processes will be used to fabricate printed wiring boards for high frequency electronics.

  4. Effects of closed immersion filtered water flow velocity on the ablation threshold of bisphenol A polycarbonate during excimer laser machining

    NASA Astrophysics Data System (ADS)

    Dowding, Colin; Lawrence, Jonathan


    A closed flowing thick film filtered water immersion technique ensures a controlled geometry for both the optical interfaces of the flowing liquid film and allows repeatable control of flow-rate during machining. This has the action of preventing splashing, ensures repeatable machining conditions and allows control of liquid flow velocity. To investigate the impact of this technique on ablation threshold, bisphenol A polycarbonate samples have been machined using KrF excimer laser radiation passing through a medium of filtered water flowing at a number of flow velocities, that are controllable by modifying the liquid flow-rates. An average decrease in ablation threshold of 7.5% when using turbulent flow velocity regime closed thick film filtered water immersed ablation, compared to ablation using a similar beam in ambient air; however, the use of laminar flow velocities resulted in negligible differences between closed flowing thick film filtered water immersion and ambient air. Plotting the recorded threshold fluence achieved with varying flow velocity showed that an optimum flow velocity of 3.00 m/s existed which yielded a minimum ablation threshold of 112 mJ/cm 2. This is attributed to the distortion of the ablation plume effected by the flowing immersion fluid changing the ablation mechanism: at laminar flow velocities Bremsstrahlung attenuation decreases etch rate, at excessive flow velocities the plume is completely destroyed, removing the effect of plume etching. Laminar flow velocity regime ablation is limited by slow removal of debris causing a non-linear etch rate over ' n' pulses which is a result of debris produced by one pulse remaining suspended over the feature for the next pulse. The impact of closed thick film filtered water immersed ablation is dependant upon beam fluence: high fluence beams achieved greater etch efficiency at high flow velocities as the effect of Bremsstrahlung attenuation is removed by the action of the fluid on the plume; low

  5. Surface 3D Micro Free Forms: Multifunctional Microstructured Mesoporous α-Alumina by in Situ Slip Casting Using Excimer Laser Ablated Polycarbonate Molds.


    Rowthu, Sriharitha; Böhlen, Karl; Bowen, Paul; Hoffmann, Patrik


    Ceramic surface microstructuring is a rapidly growing field with a variety of applications in tribology, wetting, biology, and so on. However, there are limitations to large-area microstructuring and fabrication of three-dimensional (3D) micro free forms. Here, we present a route to obtain intricate surface structures through in situ slip casting using polydimethylsiloxane (PDMS) negative molds which are replicated from excimer laser ablated polycarbonate (PC) master molds. PC sheets are ablated with a nanosecond KrF (λ = 248 nm) excimer laser mask projection system to obtain micron-scale 3D surface features over a large area of up to 3 m(2). Complex surface structures that include 3D free forms such as 3D topography of Switzerland, shallow structures such as diffractive optical elements (60 nm step) and conical micropillars have been obtained. The samples are defect-free produced with thicknesses of up to 10 mm and 120 mm diameter. The drying process of the slip cast alumina slurry takes place as a one-dimensional process, through surface evaporation and water permeation through the PDMS membrane. This allows homogeneous one-dimensional shrinkage during the drying process, independent of the sample's lateral dimensions. A linear mass diffusion model has been proposed to predict and explain the drying process of these ceramic colloidal suspensions. The calculated drying time is linearly proportional to the height of the slurry and the thickness of the negatively structured PDMS and is validated by the experimental results. An experimentally observed optimum Sylgard PDMS thickness range of ∼400 μm to 1 mm has achieved the best quality microstructured green compacts. Further, the model predicts that the drying time is independent of the microstructured areas and was validated using experimental observations carried out with microstructured areas of 300 mm(2), 1200 mm(2), and 120 cm(2). Therefore, in principle, the structures can be further replicated in areas up

  6. Excimer laser annealing to fabricate low cost solar cells

    NASA Technical Reports Server (NTRS)


    The objective is to show whether or not pulsed excimer laser annealing (PELA) of ion-implanted junctions is a cost effective replacement for diffused junctions in fabricating crystalline silicon solar cells. The preliminary economic analysis completed shows that the use of PELA to fabricate both the front junction and back surface field (BSF) would cost approximately 35 cents per peak watt (Wp), compared to a cost of 15 cents/Wp for diffusion, aluminum BSF and an extra cleaning step in the baseline process. The cost advantage of the PELA process depends on improving the average cell efficiency from 14% to 16%, which would lower the overall cost of the module by about 15 cents/Wp. An optimized PELA process compatible with commercial production is to be developed, and increased cell efficiency with sufficient product for adequate statistical analysis demonstrated. An excimer laser annealing station was set-up and made operational. The first experiment used 248 nm radiation to anneal phosphorus implants in polished and texture-etched silicon.

  7. Multifiber excimer laser catheter design strategies for various medical applications

    NASA Astrophysics Data System (ADS)

    Verdaasdonck, Rudolf M.; van Swol, Christiaan F. P.; van Leeuwen, Ton G. J. M.; Tulleken, Cees A. F.; Boon, Tom A.


    For the XeCl Excimer laser (308 nm, 115 ns), special design multifiber laser catheters were developed and theoretically as well as experimentally evaluated. Monte Carlo simulations showed that the penetration depth of 308 nm XeCl excimer light varied from 50 to 200 micrometers for fiber diameters from 50 to 550 micrometers and larger. Tissue ablation is expected to be restricted to this irradiated area. In order to ablate larger tissue areas, a flexible bundle of fibers is used introducing gaps in the irradiance distribution due to dead space in between the individual fibers. Multifiber catheters were developed for a unique neurosurgery bypass procedure and for urethra stricture surgery. Real-time, close-up, high speed video imaging showed that tissue ablation mechanism of these catheters is predominately governed by explosive short-life vapor bubbles fragmenting the tissue to small particles. In order to temper the ablation process, laser energy was delivered in 8 pulses divided over 8 sectors of a multifiber catheter (multiplexing), keeping the same fluence instead of one pulse addressing all the fibers at once.

  8. Three years of clinical experiences on excimer laser angioplasty

    NASA Astrophysics Data System (ADS)

    Viligiardi, Riccardo; Galiberti, Sandra; Pini, Roberto; Salimbeni, Renzo


    We report here the experience of our multidisciplinary group that has been working since 1986 on excimer laser angioplasty. After having selected the excimer laser between the available sources because of the negligible lesions left on the residual tissue, we had the purpose to develop a suitable laser and catheter system. Neglecting here all the preliminary studies, we outline only a typical phenomenon related to the energy delivery and useful for the comprehension of the recanalization process. The energy emitted by every single fiber determines, under a certain threshold, independent recanalized channels in the plaque with residual flaps. At a higher energy level the overposition of the lobes, due to the intrinsic divergence, up to the recanalization in a single large channel. In our opinion this condition is crucial in the design of the catheters to obtain an optical instead of a mechanical recanalization. The biological experimentation conducted during the preliminary tests on human hearts obtained from transplants or cadavers, convinced us that the correct goal to pursue was unique laser angioplasty without the need for further balloon dilation.

  9. Smartphone-enabled filterless fluorescence assay utilizing the pyrene excimer

    NASA Astrophysics Data System (ADS)

    Goertz, John P.; White, Ian M.


    Fluorescence microscopy offers a number of advantages for cell- and biomarker-based diagnostics with regards to ease of use and interpretation, sensitivity, and specificity. However, its use in low-resource settings is often hindered by the need for bulky microscopes with expensive excitation and filter setups. While many advances have been made towards utilizing smartphones as microscopes, there remains a reliance on complex attachments to facilitate fluorescence microscopy. Here, we report progress towards a filter-less fluorescent assay utilizing ultraviolet light, an unmodified smartphone, and pyrene-labeled aptamers. The pyrene monomer is excited at a wavelength of 350 nm and emits at approximately 390 nm; when two pyrene molecules are brought into close proximity, however, they form an excimer which emits at approximately 490 nm. We have engineered pyrene-conjugated DNA sequences such that the fluorophores, normally in monomeric configuration, are brought into proximity upon binding of the DNA to its target. The large Stokes shift between excitation and emission of the excimer allows us to detect such biorecognition events with an unfiltered smartphone camera, enabling the use of this assay in low-resource settings where portability and easeof- use are paramount.

  10. Pixel diamond detectors for excimer laser beam diagnostics

    NASA Astrophysics Data System (ADS)

    Girolami, M.; Allegrini, P.; Conte, G.; Salvatori, S.


    Laser beam profiling technology in the UV spectrum of light is evolving with the increase of excimer lasers and lamps applications, that span from lithography for VLSI circuits to eye surgery. The development of a beam-profiler, able to capture the excimer laser single pulse and process the acquired pixel current signals in the time period between each pulse, is mandatory for such applications. 1D and 2D array detectors have been realized on polycrystalline CVD diamond specimens. The fast diamond photoresponse, in the ns time regime, suggests the suitability of such devices for fine tuning feedback of high-power pulsed-laser cavities, whereas solar-blindness guarantees high performance in UV beam diagnostics, also under high intensity background illumination. Offering unique properties in terms of thermal conductivity and visible-light transparency, diamond represents one of the most suitable candidate for the detection of high-power UV laser emission. The relatively high resistivity of diamond in the dark has allowed the fabrication of photoconductive vertical pixel-detectors. A semitransparent light-receiving back-side contact has been used for detector biasing. Each pixel signal has been conditioned by a multi-channel read-out electronics made up of a high-sensitive integrator and a Σ-Δ A/D converter. The 500 μs conversion time has allowed a data acquisition rate up to 2 kSPS (Sample Per Second).

  11. Oxygen pumps

    NASA Technical Reports Server (NTRS)


    Special considerations to be given to the design, fabrication, and use of centrifugal pumps for liquid O2 to avoid conditions that lead to system failure are given. Emphasis was placed on turbine pumps for flight applications.

  12. Casing pump

    SciTech Connect

    Bass, H.E.; Bass, R.E.


    A natural gas operated pump is described for use in the casing of an oil well, comprising: a tubular pump body having an open lower end for admitting well fluids to the interior of the pump body and an open upper end, wherein a downwardly facing seating surface is formed on the inner periphery of the pump body adjacent the upper end thereof; means for forming a seal between the pump body and the casing of the well; a rod extending longitudinally through the seating surface formed in the pump body and protruding from the upper end of the pump body; a valve member mounted on the rod below the seating surface and shaped to mate with the seating surface; and means for vertically positioning the rod in proportion to fluid pressure within the pump body.

  13. Magnetocaloric pump

    NASA Technical Reports Server (NTRS)

    Brown, G. V.


    Very cold liquids and gases such as helium, neon, and nitrogen can be pumped by using magnetocaloric effect. Adiabatic magnetization and demagnetization are used to alternately heat and cool slug of pumped fluid contained in closed chamber.



    Pulley, O.O.


    This patent reiates to electromagnetic pumps for electricity-conducting fluids and, in particular, describes several modifications for a linear conduction type electromagnetic interaction pump. The invention resides in passing the return conductor for the current traversing the fiuid in the duct back through the gap in the iron circuit of the pump. Both the maximum allowable pressure and the efficiency of a linear conduction electromagnetic pump are increased by incorporation of the present invention.

  15. Observation of parametric instabilities in the quarter critical density region driven by the Nike KrF laser

    NASA Astrophysics Data System (ADS)

    Weaver, J. L.; Oh, J.; Phillips, L.; Afeyan, B.; Seely, J.; Kehne, D.; Brown, C. M.; Obenschain, S. P.; Serlin, V.; Schmitt, A. J.; Feldman, U.; Lehmberg, R. H.; Mclean, E.; Manka, C.


    The krypton-fluoride (KrF) laser is an attractive choice for inertial confinement fusion due to its combination of short wavelength (λ =248 nm), large bandwidth (up to 3 THz), and superior beam smoothing by induced spatial incoherence. These qualities improve the overall hydrodynamics of directly driven pellet implosions and should allow use of increased laser intensity due to higher thresholds for laser plasma instabilities when compared to frequency tripled Nd:glass lasers (λ =351 nm). Here, we report the first observations of the two-plasmon decay instability using a KrF laser. The experiments utilized the Nike laser facility to irradiate solid plastic planar targets over a range of pulse lengths (0.35 ns≤τ≤1.25 ns) and intensities (up to 2×1015 W/cm2). Variation of the laser pulse created different combinations of electron temperature and electron density scale length. The observed onset of instability growth was consistent with the expected scaling that KrF lasers have a higher intensity threshold for instabilities in the quarter critical density region.

  16. Observation of parametric instabilities in the quarter critical density region driven by the Nike KrF laser

    SciTech Connect

    Weaver, J. L.; Kehne, D.; Brown, C. M.; Obenschain, S. P.; Serlin, V.; Schmitt, A. J.; Oh, J.; Lehmberg, R. H.; Mclean, E.; Manka, C.; Phillips, L.; Afeyan, B.; Seely, J.; Feldman, U.


    The krypton-fluoride (KrF) laser is an attractive choice for inertial confinement fusion due to its combination of short wavelength ({lambda}=248 nm), large bandwidth (up to 3 THz), and superior beam smoothing by induced spatial incoherence. These qualities improve the overall hydrodynamics of directly driven pellet implosions and should allow use of increased laser intensity due to higher thresholds for laser plasma instabilities when compared to frequency tripled Nd:glass lasers ({lambda}=351 nm). Here, we report the first observations of the two-plasmon decay instability using a KrF laser. The experiments utilized the Nike laser facility to irradiate solid plastic planar targets over a range of pulse lengths (0.35 ns{<=}{tau}{<=}1.25 ns) and intensities (up to 2 Multiplication-Sign 10{sup 15} W/cm{sup 2}). Variation of the laser pulse created different combinations of electron temperature and electron density scale length. The observed onset of instability growth was consistent with the expected scaling that KrF lasers have a higher intensity threshold for instabilities in the quarter critical density region.

  17. Implementation of contact hole patterning performance with KrF resist flow process for 80nm DRAM application

    NASA Astrophysics Data System (ADS)

    Kim, Hyoung-ryeun; Park, DongHeok; Kim, HyeongSoo


    Currently, 193nm lithography including contact hole patterning is being integrated into manufacturable process at 80nm technology nodes. However, for 193nm contact hole patterning, many researchers have reported various troubles such as poor profiles, low exposure dose, and pattern edge roughness due to inherent flaws of ArF resist materials. Also, it is desirable to be extended the KrF lithography at a cost. Of course, the patterning of very small contact hole features for the 80nm DRAM device generation will be a difficult challenge for 248nm lithography. In this work, we study the potential for contact photoresist reflow to be used with 248nm photoresist to increase process windows of small contact dimensions at the 80nm DRAM device generation. In KrF 0.80NA scanner, resist flow process and layout optimization was carried out to achieve the contact hole patterning. The contact CD at best focus is 140nm and the amount of photoresist flow is approximately 52nm. For a contact hole with CDs of 88nm +/- 10%, Focus-Exposure windows over the wafer are 0.3um and 10%, respectively. In conclusion, we have successfully achieved the contact hole patterning with KrF resist flow process for 80nm DRAM device.



    Underwood, N.


    This patent relates to a pump suitable fur pumping highly corrosive gases wherein no lubricant is needed in the pumping chamber thus eliminating possible contamination sources. The chamber contains a gas inlet and outlet in each side, with a paddle like piston suspended by a sylphon seal between these pcrts. An external arrangement causes the paddle to oscillate rapidly between the ports, alternately compressing and exhausting the gas trapped on each side of the paddle. Since the paddle does nnt touch the chamber sides at any point, no lubricant is required. This pump is useful for pumping large quantities of uranium hexafluorine.

  19. Synthesis, structure, and excimer formation of vesicular assemblies carrying 1- or 2-naphthyl chromophores

    SciTech Connect

    Sisido, Masahiki; Sato, Yasuhiko; Sasaki, Hiroki; Imanishi, Yukio )


    New chromophoric amphiphiles consisting of optically active 1- or 2-naphthylalanines, each carrying two long alkyl chains and an ammonium ion, were synthesized. These amphiphiles were found to form vesicular structures in aqueous dispersion, and those having two octadecyl chains showed a gel-liquid crystalline transition around room temperature. UV and CD spectra showed exciton-type interactions for the 2-naphthyl amphiphiles in a high-energy excited state but no dimers or higher aggregates of the naphthyl groups in the ground state. Fluorescence spectra showed monomer and excimer emissions. The circularly polarized fluorescence spectra showed a positive signal at the excimer emission, indicating a chiral excimer configuration.

  20. Polyfluorophore Excimers and Exciplexes as FRET Donors in DNA

    PubMed Central

    Teo, Yin Nah; Kool, Eric T.


    We describe studies aimed at testing whether oligomeric exciplex- and excimer fluorophores conjugated to DNA have the potential to act as donors for energy transfer by the Förster mechanism. Oligodeoxyfluorosides (ODFs) are composed of stacked, electronically interacting fluorophores replacing the bases on a DNA scaffold. The monomer chromophores in the twenty tetramer-length ODFs studied here include pyrene (Y), benzopyrene (B), perylene (E), dimethylaminostilbene (D), and a nonfluorescent spacer (S); these are conjugated in varied combinations at the 3’ end of a 14mer DNA probe sequence. In the absence of an acceptor chromophore, many of the ODF-DNAs show broad, unstructured long-wavelength emission peaks characteristic of excimer and exciplex excited states, similar to what has been observed for unconjugated ODFs. Although such delocalized excited states have been widely studied, we know of no prior report of their use in FRET. We tested the ability of the twenty ODFs to donate energy to Cy5 and TAMRA dyes conjugated to a complementary strand of DNA, with these acceptors oriented either at the near or far end of the ODF-conjugated probes. Results showed that a number of the ODF fluorophores exhibited relatively efficient energy transfer characteristic of the Förster mechanism, as judged by drops in donor emission quantum yield and fluorescence lifetime, accompanied by increases in intensity of acceptor emission bands. Excimer/exciplex bands in the donors were selectively quenched while shorter-wavelength monomer emission stayed relatively constant, consistent with the notion that the delocalized excited states, rather than individual fluorophores, are the donors. Interestingly, only specific sequences of ODFs were able to act as donors, while others did not, even though their emission wavelengths were similar. The new FRET donors possess large Stokes shifts, which can be beneficial for multiple applications. In addition, all ODFs can be excited at a single

  1. Acceleration to High Velocities and Heating by Impact Using Nike KrF laser

    NASA Astrophysics Data System (ADS)

    Karasik, Max


    Shock ignition, impact ignition, as well as higher intensity conventional hot spot ignition designs reduce driver energy requirement by pushing the envelope in laser intensity and target implosion velocities. This talk will describe experiments that for the first time reach target velocities in the range of 700 -- 1000 km/s. The highly accelerated planar foils of deuterated polystyrene, some with bromine doping, are made to collide with a witness foil to produce extreme shock pressures and result in heating of matter to thermonuclear temperatures. Target acceleration and collision are diagnosed using large field of view monochromatic x-ray imaging with backlighting as well as bremsstrahlung self-emission. The impact conditions are diagnosed using DD fusion neutron yield, with over 10^6 neutrons produced during the collision. Time-of-flight neutron detectors are used to measure the ion temperature upon impact, which reaches 2 -- 3 keV. The experiments are performed on the Nike facility, reconfigured specifically for high intensity operation. The short wavelength and high illumination uniformity of Nike KrF laser uniquely enable access to this new parameter regime. Intensities of (0.4 -- 1.2) x 10^15 W/cm^2 and pulse durations of 0.4 -- 2 ns were utilized. Modeling of the target acceleration, collision, and neutron production is performed using the FAST3D radiation hydrodynamics code with a non-LTE radiation model. Work is supported by US Department of Energy.

  2. Laser Plasma Instability (LPI) Driven Light Scattering Measurements with Nike KrF Laser

    NASA Astrophysics Data System (ADS)

    Oh, J.; Weaver, J. L.; Kehne, D. M.; Obenschain, S. P.; McLean, E. A.; Lehmberg, R. H.


    With the short wavelength (248 nm), large bandwidth (1˜2 THz), and ISI beam smoothing, Nike KrF laser is expected to have higher LPI thresholds than observed at other laser facilities. Previous measurements using the Nike laser [J. L. Weaver et al, Phys. Plasmas 14, 056316 (2007)] showed no LPI evidence from CH targets up to I˜2x10^15 W/cm^2. For further experiments to detect LPI excitation, Nike capabilities have been extended to achieve higher laser intensities by tighter beam focusing and higher power pulses. This talk will present results of a recent LPI experiment with the extended Nike capabilities focusing on light emission data in spectral ranges relevant to the Raman (SRS) and Two-Plasmon Decay (TPD) instabilities. The primary diagnostics were time-resolved spectrometers with an absolute-intensity-calibrated photodiode array in (0.4˜0.8)φ0 and a streak camera near 0.5φ0. The measurements were conducted at laser intensities of 10^15˜10^16 W/cm^2 on planar targets of CH solids and RF foams.

  3. Boron distribution in silicon after multiple pulse excimer laser annealing

    SciTech Connect

    Monakhov, E.V.; Svensson, B.G.; Linnarsson, M.K.; La Magna, A.; Italia, M.; Privitera, V.; Fortunato, G.; Cuscuna, M.; Mariucci, L.


    We have studied B redistribution in Si after excimer laser annealing (ELA) with multiple laser pulses. B was implanted with energies of 1 and 10 keV and doses of 1x10{sup 14} and 1x10{sup 15} cm{sup -2}. ELA with the number of pulses from 1 to 100 was performed at room temperature and 450 deg. C in vacuum. Irrespective of the implantation parameters and the ELA conditions used, a pile-up in the B concentration is observed near the maximum melting depth after ten pulses of ELA. Moreover, a detailed study has revealed that B accumulates at the maximum melt depth gradually with the number of ELA pulses. Besides, an increase in the carrier concentration is observed at the maximum melt depth, suggesting electrical activity of the accumulated B. Formation of Si-B complexes and vacancy accumulation during multiple ELA are discussed as possible mechanisms for the B build-up.

  4. Applications of the 308-nm excimer laser in dermatology

    NASA Astrophysics Data System (ADS)

    Farkas, A.; Kemeny, L.


    Excimer lasers contain a mixture of a noble inert gas and a halogen, which form excited dimers only in the activated state. High-energy current is used to produce these dimers, which have a very short lifetime, and after their fast dissociation they release the excitation energy through ultraviolet photons. The application of these lasers proved to be successful in medicine, including the field of ophthalmology, cardiology, angiology, dentistry, orthopaedics, and, in recent years, dermatology. For medical purposes, the 193-nm argon fluoride, the 248-nm krypton fluoride, the 351-nm xenon fluoride, and the 308-nm xenon chloride lasers are used. Recently, the 308-nm xenon chloride laser has gained much attention as a very effective treatment modality in dermatological disorders. It was successfully utilized in psoriasis; later, it proved to be useful in handling other lightsensitive skin disorders and even in the treatment of allergic rhinitis. This review summarizes the possible applications of this promising tool in dermatology.

  5. Histological study of excimer laser on carotid artery

    NASA Astrophysics Data System (ADS)

    Chavantes, Maria C.; Pasqualucci, C. A.; Zamorano, Lucia J.


    The employment of photoablative effect on coronary artery angioplasty has been a new exciting field as a treatment option. Guided by good results in the literature, our group decided to study the laser/tissue interaction on carotid arteries with the intent of a less invasive treatment of intracranial and extracranial obstructed disease in vascular neurosurgery. We studied human cartoid arteries from ten male autopsy specimens with an average age of 53 years (34 - 37 years old) which a total of 22 laser applications were performed. Using the same repetition rate and energy, 20 Hz and 30 mJ, we compared the effect of the laser energy on 'normal' and 'pathologic' areas of the carotid arteries. The pathologic specimens, presenting calcified and non-calcified plaques, the same as the macroscopical 'normal' specimens, were submitted to the energy of the Excimer Laser with 308 nm wavelength. The laser beam was delivered perpendicularly through continuous flushing of saline on the targeted artery wall varying from 200 to 400 pulses. Histological studies were done and statistical analysis was performed. The results showed that the depth of penetration varied from 113 micrometers to 1200 micrometers , with a width of the lesion ranging from 150 micrometers - 1500 micrometers . In our study we found that the range between non-effective and destructive effect caused by the laser was around 400 pulses. We encountered minimal degree of carbonization while lasering on calcified plaques. We concluded that Excimer laser is a feasible and secure tool to prevent thermical complications of laser treatment, which will allow neurosurgeons in the future athermic laser angioplasty. Progress in this field must rely on further in vitro and in vivo research, before it can be clinically applied as well as improvements in delivery systems.

  6. Stimulated Raman scattering in lead vapor heat pipe for tunable and narrow-linewidth XeCl excimer laser

    SciTech Connect

    Rieger, H.


    Narrow-linewidth and high-efficiency conversion of stimulated Raman scattering (SRS) in a lead vapor heat pipe was observed using a narrow-linewidth and injection-locked XeCl excimer laser system as the pump source. The XeCl laser was continuously tuned over its entire B-X gain curve, from the (0-0) transition to the (0-3) transition, giving it a range of 0.8 nm (307.65-308.45 nm). The laser linewidth was narrowed down to 0.002 A (0.02 cm/sup -1/). The output energy was 310 mJ/pulse, with a repetition rate up to 50 pps and good beam quality. A lead vapor heat pipe operating at 1225/sup 0/C was used as a single-pass stimulated Raman converter, shifting the radiation from 308 to 459 nm. Photon conversion efficiency as high as 80 percent was achieved, using a pump linewidth of 0.01 A.

  7. Investigations of Buffer-Gases Role in Xenon and Halogen Excimer Mixtures

    NASA Astrophysics Data System (ADS)

    Ciobotaru, L. C.; Porosnicu, C.


    Excimer- is an acronym in use for the excited dimmer, molecule which does not exist in the ground state but only in an excited state. This paper presents the role of the buffer-gas atoms (Ar, Ne, He), in the (Cl2/I2 Xe) excimer radiation emission mechanisms. The same buffer-gas produced a different effect on the excimer emission intensity: the neon and argon addition to xenon/chlorine/iodine had a negative effect while the helium and neon addition had a positive effect. The Penning reactions play an important role in the excimer radiation generation in connection with the gas-buffer addition and the halogen ionization potential value. The measurements are performed using a dielectric barrier discharge (DBD) at moderate pressure in a panel, respectively classic coaxial geometry.

  8. The Characteristics of Dielectric Barrier Discharge and its Influence on the Excimer XeCl* Emission

    NASA Astrophysics Data System (ADS)

    Xu, Jing-zhou; Liu, Wei; Liang, Rong-qing; Ren, Zhao-xing


    In this work, the influence of discharge modes on the excimer XeCl* emission (308 nm) has been studied by adding helium gas into the xenon and chlorine mixture. It is found that the transition from filament discharge to glow/filament-combined discharge leads to the decrease in excimer emission. We are the first one to use a flowing water film as an outer transparent electrode, and achieve a higher UV intensity, compared with the case by using a metal mesh as the outer electrode. The influence of the gas temperature both in the reactor Tg and in a discharge channel Tc on the excimer emission has been analyzed preliminarily. Finally, it has been expected that the replacement of chlorine gas Cl2 by another chlorine gas may reduce the heat generated in the discharge processes and give rise to the excimer XeCl* radiation.

  9. A Decade Of Excimer Laser Research And Development At Avco Research Laboratory

    NASA Astrophysics Data System (ADS)

    Boness, M. J. W.


    This paper presents a brief overview of excimer laser research and development performed at the Avco Research Laboratory during the past decade from 1975 to the present day. Progress and highlights are depicted against a backdrop of parallel developmental paths connecting the original search and discovery activities of the mid-seventies to the development of high power repetitively-pulsed Raman shifted excimer devices in progress today.

  10. Studies in fiber guided excimer laser surgery for cutting and drilling bone and meniscus.


    Dressel, M; Jahn, R; Neu, W; Jungbluth, K H


    Our experiments on transmitting high-power excimer laser pulses through optical fibers and our investigations on excimer laser ablation of hard tissue show the feasibility of using the excimer laser as an additional instrument in general and accident surgery involving minimal invasive surgery. By combining XeCl-excimer lasers and tapered fused silica fibers we obtained output fluences up to 32 J/cm2 and ablation rates of 3 microns/pulse of hard tissue. This enables us to cut bone and cartilage in a period of time which is suitable for clinical operations. Various experiments were carried out on cadavers in order to optimize the parameters of the excimer laser and fibers: e.g., wavelength, pulse duration, energy, repetition rate, fiber core diameter. The surfaces of the cut tissue are comparable to cuts with conventional instruments. No carbonisation was observed. The temperature increase is below 40 degrees C in the tissue surrounding the laser spot. The healing rate of an excimer laser cut is not slower than mechanical treatments; the quality is comparable. PMID:1661360

  11. Maximization of process window for low-k1 spacing using KrF lithography

    NASA Astrophysics Data System (ADS)

    Fu, Shih-Chi; Kuo, Ching-Sen; Shiu, Feng-Jia; Chen, Jieh-Jang; Tsia, Chia-Shiung; Ho, Chia-Tong; Wang, Chung


    The spaces between floating-gate poly-silicon are critical for the electrical properties of advanced non-volatile memory (NVM). However, the patterning of low-k1 semi-dense spaces in NVM cells is more challenging than the patterning of dense lines in DRAM cells as the former is of lower normalized image log slope (NILS) and optical contrast. Many experiments, including various NA/σ trials, binary intensity or attenuated phase-shift masks (AttPSM), application of various sizes of sub-resolution assist feature (SRAF), or even negative-type photoresist (N-PR) by clear-field patterning, are tested and compared for the 140nm spaces with L:S ratio of 3:1 using KrF lithography. Combined with aerial image simulations and a process window analyzer, the optimal process condition was found. The SRAF functions to mimic the environment of dense pattern and thereby extends the process latitude of the semi-dense spaces. But it damages the image pattern if the side-lobe intensity approaches the intensity threshold. The maximum allowable SRAF depends on mask type and field used. Generally speaking, the SRAF should be smaller in bright-field exposure using the negative-type photoresist (N-PR) than in dark-field exposure using the positive-type photoresist (P-PR) application. The N-PR, despite its intrinsic poorer pattern profile and larger line-edge-roughness as contributed from photoresist effect, was found to surpass the P-PR in process window. A trade-off among process window, mask error enhancement factor (MEEF), pattern profile and mask cost is unavoidable to the selection of mask type or mask bias, and is considered in this paper in the last.

  12. Axial Pump

    NASA Technical Reports Server (NTRS)

    Bozeman, Richard J., Jr. (Inventor); Akkerman, James W. (Inventor); Aber, Gregory S. (Inventor); VanDamm, George Arthur (Inventor); Bacak, James W. (Inventor); Svejkovsky, Paul A. (Inventor); Benkowski, Robert J. (Inventor)


    A rotary blood pump includes a pump housing for receiving a flow straightener, a rotor mounted on rotor bearings and having an inducer portion and an impeller portion, and a diffuser. The entrance angle, outlet angle, axial and radial clearances of blades associated with the flow straightener, inducer portion, impeller portion and diffuser are optimized to minimize hemolysis while maintaining pump efficiency. The rotor bearing includes a bearing chamber that is filled with cross-linked blood or other bio-compatible material. A back emf integrated circuit regulates rotor operation and a microcomputer may be used to control one or more back emf integrated circuits. A plurality of magnets are disposed in each of a plurality of impeller blades with a small air gap. A stator may be axially adjusted on the pump housing to absorb bearing load and maximize pump efficiency.

  13. Ferroelectric Pump

    NASA Technical Reports Server (NTRS)

    Jalink, Antony, Jr. (Inventor); Hellbaum, Richard F. (Inventor); Rohrbach, Wayne W. (Inventor)


    A ferroelectric pump has one or more variable volume pumping chambers internal to a housing. Each chamber has at least one wall comprising a dome shaped internally prestressed ferroelectric actuator having a curvature and a dome height that varies with an electric voltage applied between an inside and outside surface of the actuator. A pumped medium flows into and out of each pumping chamber in response to displacement of the ferroelectric actuator. The ferroelectric actuator is mounted within each wall and isolates each ferroelectric actuator from the pumped medium, supplies a path for voltage to be applied to each ferroelectric actuator, and provides for positive containment of each ferroelectric actuator while allowing displacement of the entirety of each ferroelectric actuator in response to the applied voltage.

  14. Evaluation of corneal ablation by an optical parametric oscillator (OPO) at 2.94 μm and an Er:YAG laser and comparison to ablation by a 193-nm excimer laser

    NASA Astrophysics Data System (ADS)

    Telfair, William B.; Hoffman, Hanna J.; Nordquist, Robert E.; Eiferman, Richard A.


    Purpose: This study first evaluated the corneal ablation characteristics of (1) an Nd:YAG pumped OPO (Optical Parametric Oscillator) at 2.94 microns and (2) a short pulse Er:YAG laser. Secondly, it compared the histopathology and surface quality of these ablations with (3) a 193 nm excimer laser. Finally, the healing characteristics over 4 months of cat eyes treated with the OPO were evaluated. Methods: Custom designed Nd:YAG/OPO and Er:YAG lasers were integrated with a new scanning delivery system to perform PRK myopic correction procedures. After initial ablation studies to determine ablation thresholds and rates, human cadaver eyes and in-vivo cat eyes were treated with (1) a 6.0 mm Dia, 30 micron deep PTK ablation and (2) a 6.0 mm Dia, -5.0 Diopter PRK ablation. Cadaver eyes were also treated with a 5.0 mm Dia, -5.0 Diopter LASIK ablation. Finally, cats were treated with the OPO in a 4 month healing study. Results: Ablation thresholds below 100 mJ/cm2 and ablation rates comparable to the excimer were demonstrated for both infrared systems. Light Microscopy (LM) showed no thermal damage for low fluence treatments, but noticeable thermal damage at higher fluences. SEM and TEM revealed morphologically similar surfaces for low fluence OPO and excimer samples with a smooth base and no evidence of collagen shrinkage. The Er:YAG and higher fluence OPO treated samples revealed more damage along with visible collagen coagulation and shrinkage in some cases. Healing was remarkably unremarkable. All eyes had a mild healing response with no stromal haze and showed topographic flattening. LM demonstrated nothing except a moderate increase in keratocyte activity in the upper third of the stroma. TEM confirmed this along with irregular basement membranes. Conclusions: A non- thermal ablation process called photospallation is demonstrated for the first time using short pulse infrared lasers yielding damage zones comparable to the excimer and healing which is also comparable to

  15. Effectiveness of a 308-nm excimer laser in treatment of vitiligo: a review.


    Alhowaish, Alauldin Khalef; Dietrich, Nathalie; Onder, Meltem; Fritz, Klaus


    Vitiligo is a relatively common acquired disorder, characterized by progressive loss of melanocytes from the epidermis and the epidermal appendages. The disease is associated with considerable morbidity because of a major impact on the quality of life. The treatment for vitiligo is generally unsatisfactory and challenging. There are a variety of therapeutic possibilities including topical corticosteroids, topical calcineurin inhibitors, as well as phototherapy with Psoralen plus UVA (PUVA), narrow-band UVB, and a 308-nm excimer laser and/or lamps. Furthermore, surgical methods encompass grafting and transplantation while depigmentation treatments and psychological support may also be considered. The objective is to assess the effect of the 380-nm excimer laser in the treatment of vitiligo based on the available studies and case series. We searched the relevant literature about vitiligo and excimer laser published between 1990 and 2012 using the MEDLINE database. We reviewed all relevant articles about 308-nm excimer laser and light sources assessing their efficacy in the management of vitiligo as well as their side effects. The value of combination treatment methods was also analyzed. The available studies provide strong evidence that the excimer laser represents the most effective approach to treat vitiligo compared to ordinary phototherapy. Excimer laser is relatively safe and effective for localized disease. UV-sensitive areas respond best as well as a short duration of the disease. More frequent treatments achieve better results. Compared to other treatment modalities, the excimer laser most likely constitutes the treatment of choice for localized vitiligo. Its efficacy can be further improved in combination with other therapies such as corticosteroids, pimecrolimus, or tacrolimus. PMID:22892613

  16. An excimer-based FAIMS detector for detection of ultra-low concentration of explosives

    NASA Astrophysics Data System (ADS)

    Chistyakov, Alexander A.; Kotkovskii, Gennadii E.; Sychev, Alexey V.; Perederiy, Anatoly N.; Budovich, V. L.; Budovich, D. V.


    A new method of explosives detection based on the field asymmetric ion mobility spectrometry (FAIMS) and ionization by an excimer emitter has been developed jointly with a portable detector. The excimer emitter differs from usual UVionizing lamps by mechanism of emitting, energy and spectral characteristics. The developed and applied Ar2-excimer emitter has the working volume of 1 cm3, consuming power 0.6 W, the energy of photons of about 10 eV (λ=126 nm), the FWHM radiation spectrum of 10 nm and emits more than 1016 photon per second that is two orders of magnitude higher than UV-lamp of the same working volume emits. This also exceeds by an order of magnitude the quantity of photons per second for 10-Hz solid state YAG:Nd3+ - laser of 1mJ pulse energy at λ=266 nm that is also used to ionize the analyte. The Ar2-excimer ionizes explosives by direct ionization mechanism and through ionization of organic impurities. The developed Ar2-excimer-based ion source does not require cooling due to low level discharge current of emitter and is able to work with no repair more than 10000 hrs. The developed excimer-based explosives detector can analyze both vapors and traces of explosives. The FAIMS spectra of the basic types of explosives like trinitrotoluene (TNT), cyclotrimethylenetrinitramine (RDX), dinitrotoluene (DNT), cyclotetramethylenetetranitramine (HMX), nitroglycerine (NG), pentaerythritol tetranitrate (PETN) under Ar2-excimer ionization are presented. The detection limit determined for TNT vapors equals 1x10-14 g/cm3, for TNT traces- 100 pg.

  17. Thermal activation in KrF laser ablation of CuCl

    NASA Astrophysics Data System (ADS)

    Kuper, S.; Brannon, J.


    248 nm excimer abaltion of carefully prepared CuCi samples is reported, and shown to occur by a predominantly thermal mechanism. Using a quartz-crystal microbalance (QCM) to monitor abaltion, a precise detailed plot of single-pulse mass removal versus incident fluence was obtained for fluences up to 150 mJ/sq cm. A two-parameter Arrhenius exponential function was found to fit the experimental abaltion data. Calculations of laser-induced surface heating were caried out by use of a finite-difference heating code, formulated in terms of enthalpy. Ablation was observed to commence at a fluence of 25 mJ/sq cm, where the calculated surface temperature is approximately 910 K-some 200 K above the melting point. Dynamic ablation was included in the finite-difference calculation by allowing the position of the CuCl surface Xi to vary in time. The best data fit is provided by the zeroth-order kinetic equation: d Xi/dt = (16 A/ns)exp(-38 kJ/mole)/RT(sub Xi) where T(sub Xi) is the surface temperature. A thermodynamic calculation shows the average heat of CuCl vaporization in the temperature range from 900 to 2000 K to be near the fit of value of 38 kJ/mole. From plots of the ablation depth versus time, the CuCl surface was estimated to recede during the ablation at rates up to 10 cm/s.

  18. Submersible pump

    SciTech Connect

    Todd, D. B.


    A method and apparatus for using a submersible pump to lift reservoir fluids in a well while having the tubing/casing annulus isolated from the produced fluids. The apparatus allows the submersible pump to be positioned above the annular packoff device. The apparatus comprises an outer shield that encloses the pump and can be attached to the production tubing. The lower end of the shield attaches to a short tubing section that seals with the annular packoff device or a receptacle above the annular packoff device.

  19. Excimer laser lead extraction catheter with increased laser parameters

    NASA Astrophysics Data System (ADS)

    Coe, M. Sean; Taylor, Kevin D.; Lippincott, Rebecca A.; Sorokoumov, Oleg; Papaioannou, Thanassis


    A fiber optic catheter connected to a pulsed excimer laser (308 nm) is currently used to extract chronically implanted pacemaker and defibrillator leads at Fluence of 60 mJ/mm2 and repetition rate of 40 Hz. The object of this study was to determine the effect of higher repetition rates (80 Hz) in the catheter's cutting performance. The penetration rate (micrometers /sec), and the associated mechanical and thermal effects were measured in soft (porcine myocardium) and hard tissue (bovine tendon) at 60 mJ/mm2-80 Hz, and were compared to the corresponding values at commercially available laser parameters (60 mJ/mm2-40 Hz). Ablation rates were measured with perforation experiments and the extent of thermal and mechanical damage was measured under polarized light microscopy. For hard (soft) tissue, the laser catheter demonstrated penetration speed of 106 +/- 32 (302 +/- 101) micrometers /sec at 40 Hz and 343 +/- 120 (830 +/- 364) micrometers /sec at 80 Hz. Maximum extent of thermal effects at 40 Hz and 80 Hz was 114 +/- 35 micrometers (72 +/- 18) and 233 +/- 63 micrometers (71 +/- 16) respectively. Maximum extent of mechanical effects at 40 Hz and 80 Hz was 188 +/- 63 micrometers (590 +/- 237) and 386 +/- 100 micrometers (767 +/- 160) respectively. In vitro testing of the laser catheter with 80 Hz laser parameters has demonstrated increased penetration speed in both soft and hard fibrous tissue, while maintaining associated thermal and mechanical effects within limited ranges.

  20. Fabrication of Fresnel microlens with excimer laser contour ablation

    NASA Astrophysics Data System (ADS)

    Wójcik, Michał R.; Antończak, Arkadiusz J.; Kozioł, Paweł E.; Łazarek, Łukasz K.; Stepak, Bogusz D.; Abramski, Krzysztof M.


    Laser micromachining systems based on excimer lasers are usually oriented to work with mask projection regime because of the low pulse repetition rate as well as large beam aperture of the laser source. In case of fabricating of the complex 3D structures, this approach introduces a number of limitations. Alternative solution might be usage of direct writing laser mode. Some examples of the so called contour ablation approach for fabricating microlenses with an absolutely monotonically changing cross-sectional profile are presented in the literature. Based on this idea and introducing new variables like automatic mask selection as well as optimizing process algorithms led us to obtain more versatile method for shape approximation. Hence, there were fabricated structures with cross-sectional profiles described as functions that are monotonic on specified intervals such as Fresnel microlenses. In this paper we describe approximation of process parameters for obtaining desired cross-sectional profiles and finally fabrication of few exemplary microlenses. All structures were characterized by a digital optical microscopy and compared to the given profiles. The accuracy of reproduction of the desired structures at the level of single microns was achieved.

  1. Microencapsulation of silicon cavities using a pulsed excimer laser

    NASA Astrophysics Data System (ADS)

    Sedky, S.; Tawfik, H.; Ashour, M.; Graham, A. B.; Provine, J.; Wang, Q.; Zhang, X. X.; Howe, R. T.


    This work presents a novel low thermal-budget technique for sealing micromachined cavities in silicon. Cavities are sealed without deposition, similar to the silicon surface-migration sealing process. In contrast to the 1100 °C furnace anneal required for the migration process, the proposed technique uses short excimer laser pulses (24 ns), focused onto an area of 23 mm2, to locally heat the top few microns of the substrate, while the bulk substrate remains near ambient temperature. The treatment can be applied to selected regions of the substrate, without the need for special surface treatments or a controlled environment. This work investigates the effect of varying the laser pulse energy from 400 mJ cm-2 to 800 mJ cm-2, the pulse rate from 1 Hz to 50 Hz and the pulse count from 200 to 3000 pulses on sealing microfabricated cavities in silicon. An analytical model for the effect of holes on the surface temperature distribution is derived, which shows that much higher temperatures can be achieved by increasing the hole density. A mechanism for sealing the cavities is proposed, which indicates how complete sealing is feasible.

  2. Blunt atrial transseptal puncture using excimer laser in swine

    PubMed Central

    Elagha, Abdalla A.; Kim, Ann H.; Kocaturk, Ozgur; Lederman, Robert J.


    Objectives We describe a new approach that may enhance safety of atrial transseptal puncture, using a commercially available laser catheter that is capable of perforation only when energized. We test this approach in swine. Background Despite wide application, conventional needle transseptal puncture continues to risk inadvertent non-target perforation and its consequences. Methods We used a commercial excimer laser catheter (0.9mm Clirpath, Spectranetics). Perforation force was compared in vitro with a conventional Brockenbrough needle. Eight swine underwent laser transseptal puncture under X-ray fluoroscopy steered using a variety of delivery catheters. Results The 0.9mm laser catheter traversed in vitro targets with reduced force compared with a Brockenbrough needle. In vitro, the laser catheter created holes that were 25–30% larger than the Brockenbrough needle. Laser puncture of the atrial septum was successful and accurate in all animals, evidenced by oximetry, pressure, angiography, and necropsy. The laser catheter was steered effectively using a modified Mullins introducer sheath and using two different deflectable guiding catheters. The mean procedure time was 15 ± 6 minutes, with an average 3.0 ± 0.8 seconds of laser activation. There were no adverse sequelae after prolonged observation. Necropsy revealed discrete 0.9mm holes in all septae. Conclusion Laser puncture of the interatrial septum is feasible and safe in swine, using a blunt laser catheter that perforates tissues in a controlled fashion. PMID:17896413

  3. Excimer Laser Beam Analyzer Based on CVD Diamond

    NASA Astrophysics Data System (ADS)

    Girolami, Marco; Salvatori, Stefano; Conte, Gennaro


    1-D and 2-D detector arrays have been realized on CVD-diamond. The relatively high resistivity of diamond in the dark allowed the fabrication of photoconductive "sandwich" strip (1D) or pixel (2D) detectors: a semitransparent light-receiving back-side contact was used for detector biasing. Cross-talk between pixels was limited by using intermediate guard contacts connected at the same ground potential of the pixels. Each pixel photocurrent was conditioned by a read-out electronics composed by a high sensitive integrator and a Σ-Δ ADC converter. The overall 500 μs conversion time allowed a data acquisition rate up to 2 kSPS. The measured fast photoresponse of the samples in the ns time regime suggests to use the proposed devices for fine tuning feedback of high-power pulsed-laser cavities, whereas solar-blindness guarantees high performance in UV beam diagnostics also under high intensity background illumination. Offering unique properties in terms of thermal conductivity and visible-light transparency, diamond represents one of the most suitable candidate for the detection of high-power UV laser emission. The technology of laser beam profiling is evolving with the increase of excimer lasers applications that span from laser-cutting to VLSI and MEMS technologies. Indeed, to improve emission performances, fine tuning of the laser cavity is required. In such a view, the development of a beam-profiler, able to work in real-time between each laser pulse, is mandatory.

  4. Laser plume dynamics during excimer laser nitriding of iron

    NASA Astrophysics Data System (ADS)

    Han, M.; Carpene, E.; Lieb, K. P.; Schaaf, Peter


    Laser nitriding of iron is an interesting phenomenon both in physics and industry. On the time scale of hundreds nanoseconds, high intensity (~108 W/cm2) pulsed excimer laser irradiation on iron in nitrogen atmosphere produced a thin iron nitride layer (thickness > 400 nm) with a mean nitrogen concentration exceeding 10 at which greatly improves the iron surface mechanical properties and the corrosion or erosion resistance. Laser plasma/plume plays a crucial role in the complicated interplay of the laser-plasma-metal system. Since the nitrogen pressure is one of the most important parameters determining the laser plume dynamics, a nitrogen pressure series ranging from 0.05 bar to 10 bar is conducted. The characteristic parameters of the nitrogen depth profile are extracted and their pressure dependence is qualitatively discussed. By isotopic experiments in 15N and natural nitrogen environment, the evolution of the nitrogen depth profile during laser nitriding process is successfully traced. Both of the experimental results suggested that a 1D laser supported combustion wave model is reasonable to describe the lasers plume dynamics.

  5. Excimer-laser-assisted deposition of diamondlike carbon hard coatings

    NASA Astrophysics Data System (ADS)

    Wei, Mao-Kuo; Popp, Angelika; Lang, Adolf; Schutte, Karsten; Bergmann, Hans W.


    Diamond-like carbon (DLC) films were deposited using the excimer laser assisted physical vapor deposition at room temperature. The films deposited at high vacuum (10-5 mbar) revealed more diamond-like character than under other atmospheres of argon and hydrogen. DLC- films can be deposited with a thickness more than 1 micrometers with the help of either an additional Ti-buffer layer or an in-situ laser treatment during the deposition. The adhesion of the films was qualitatively determined by using the indentation and bending tests. Additionally, the adhesion was found to be dependent on the power densities for the target ablation (IT) and for the in-situ laser treatment (IS), as well as, on the applied buffer layer. The roughness was found to be proportional to the film thickness at various surface morphologies of the substrate. The friction coefficient of DLC-films against steel (100Cr6) was found to be approximately 0.1 and the wear loss of the films was dependent on the properties of substrate material.



    Milleron, N.


    An ion pump and pumping method are given for low vacuum pressures in which gases introduced into a pumping cavity are ionized and thereafter directed and accelerated into a quantity of liquid gettering metal where they are absorbed. In the preferred embodiment the metal is disposed as a liquid pool upon one electrode of a Phillips ion gauge type pump. Means are provided for continuously and remotely withdrawing and degassing the gettering metal. The liquid gettering metal may be heated if desired, although various combinations of gallium, indium, tin, bismuth, and lead, the preferred metals, have very low melting points. A background pressure of evaporated gettering metal may be provided by means of a resistance heated refractory metal wick protruding from the surface of the pcol of gettering metal.

  7. Electrokinetic pump


    Patel, Kamlesh D.


    A method for altering the surface properties of a particle bed. In application, the method pertains particularly to an electrokinetic pump configuration where nanoparticles are bonded to the surface of the stationary phase to alter the surface properties of the stationary phase including the surface area and/or the zeta potential and thus improve the efficiency and operating range of these pumps. By functionalizing the nanoparticles to change the zeta potential the electrokinetic pump is rendered capable of operating with working fluids having pH values that can range from 2-10 generally and acidic working fluids in particular. For applications in which the pump is intended to handle highly acidic solutions latex nanoparticles that are quaternary amine functionalized can be used.

  8. Phasor Representation of Monomer-Excimer Kinetics: General Results and Application to Pyrene.


    Martelo, Liliana; Fedorov, Alexander; Berberan-Santos, Mário N


    Phasor plots of the fluorescence intensity decay (plots of the Fourier sine transform versus the Fourier cosine transform, for one or several angular frequencies) are being increasingly used in studies of homogeneous and heterogeneous systems. In this work, the phasor approach is applied to monomer-excimer kinetics. The results obtained allow a clear visualization of the information contained in the decays. The monomer phasor falls inside the universal circle, whereas the excimer phasor lies outside it, but within the double-exponential outer boundary curve. The monomer and excimer phasors, along with those corresponding to the two exponential components of the decays, fall on a common straight line and obey the generalized lever rule. The clockwise trajectories described by both phasors upon monomer concentration increase are identified. The phasor approach allows discussing in a single graphic not only the effect of concentration but also that of rate constants, including the evolution from irreversible kinetics to fast excited-state equilibrium upon a temperature increase. The obtained results are applied to the fluorescence decays of pyrene monomer and excimer in methylcyclohexane at room temperature. A straightforward method of monomer-excimer lifetime data analysis based on linear plots is also introduced. PMID:26549817

  9. Average power scaling of UV excimer lasers drives flat panel display and lidar applications

    NASA Astrophysics Data System (ADS)

    Herbst, Ludolf; Delmdahl, Ralph F.; Paetzel, Rainer


    Average power scaling of 308nm excimer lasers has followed an evolutionary path over the last two decades driven by diverse industrial UV laser microprocessing markets. Recently, a new dual-oscillator and beam management concept for high-average power upscaling of excimer lasers has been realized, for the first time enabling as much as 1.2kW of stabilized UV-laser average output power at a UV wavelength of 308nm. The new dual-oscillator concept enables low temperature polysilicon (LTPS) fabrication to be extended to generation six glass substrates. This is essential in terms of a more economic high-volume manufacturing of flat panel displays for the soaring smartphone and tablet PC markets. Similarly, the cost-effective production of flexible displays is driven by 308nm excimer laser power scaling. Flexible displays have enormous commercial potential and can largely use the same production equipment as is used for rigid display manufacturing. Moreover, higher average output power of 308nm excimer lasers aids reducing measurement time and improving the signal-to-noise ratio in the worldwide network of high altitude Raman lidar stations. The availability of kW-class 308nm excimer lasers has the potential to take LIDAR backscattering signal strength and achievable altitude to new levels.

  10. Polycation-induced benzoperylene probe excimer formation and the ratiometric detection of heparin and heparinase.


    Yang, Meiding; Chen, Jian; Zhou, Huipeng; Li, Wenying; Wang, Yan; Li, Juanmin; Zhang, Cuiyun; Zhou, Chuibei; Yu, Cong


    A benzoperylene probe excimer emission in an aqueous buffer solution is observed for the first time, and a novel ratiometric fluorescence method based on the probe excimer emission for the sensitive detection of heparin and heparinase is demonstrated. A negatively charged benzoperylene derivative, 6-(benzo[ghi]perylene-1,2-dicarboxylic imide-yl)hexanoic acid (BPDI), was employed. A polycation, poly(diallyldimethylammonium) chloride (poly-DDA), could induce aggregation of BPDI through noncovalent interactions. A decrease of BPDI monomer emission and a simultaneous increase of BPDI excimer emission were observed. Upon the addition of heparin, the strong binding between heparin and poly-DDA caused release of BPDI monomer molecules, and an excimer-monomer emission signal transition was detected. However, after the enzymatic hydrolysis of heparin by heparinase, heparin was hydrolyzed into small fragments, which weakened the competitive binding of heparin to poly-DDA. Poly-DDA induced aggregation of BPDI, and a monomer-excimer emission signal transition was detected. Our assay is simple, rapid, inexpensive, sensitive and selective, which could facilitate the heparin and heparinase related biochemical and biomedical research. PMID:26344903