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Sample records for 193-nm excimer laser

  1. Advances in 193 nm excimer lasers for mass spectrometry applications

    NASA Astrophysics Data System (ADS)

    Delmdahl, Ralph; Esser, Hans-Gerd; Bonati, Guido

    2016-03-01

    Ongoing progress in mass analysis applications such as laser ablation inductively coupled mass spectrometry of solid samples and ultraviolet photoionization mediated sequencing of peptides and proteins is to a large extent driven by ultrashort wavelength excimer lasers at 193 nm. This paper will introduce the latest improvements achieved in the development of compact high repetition rate excimer lasers and elaborate on the impact on mass spectrometry instrumentation. Various performance and lifetime measurements obtained in a long-term endurance test over the course of 18 months will be shown and discussed in view of the laser source requirements of different mass spectrometry tasks. These sampling type applications are served by excimer lasers delivering pulsed 193 nm output of several mJ as well as fast repetition rates which are already approaching one Kilohertz. In order to open up the pathway from the laboratory to broader market industrial use, sufficient component lifetimes and long-term stable performance behavior have to be ensured. The obtained long-term results which will be presented are based on diverse 193 nm excimer laser tube improvements aiming at e.g. optimizing the gas flow dynamics and have extended the operational life the laser tube for the first time over several billion pulses even under high duty-cycle conditions.

  2. Solid sampling with 193-nm excimer laser ablation

    NASA Astrophysics Data System (ADS)

    Delmdahl, Ralph

    2007-02-01

    Reproducible and sensitive elemental analysis of solid samples is a crucial task in areas of geology (e.g. microanalysis of fluid inclusions), material sciences, industrial quality control as well as in environmental, forensic and biological studies. To date the most versatile detection method is mass-spectroscopic multi-element analysis. In order to obtain reproducible results, this requires transferring the solid sample into the gas-phase while preserving the sample's stoichiometric composition. Laser ablation in combination with Inductively Coupled Plasma-Mass Spectrometry (LA-ICP-MS) is a proven powerful technique to meet the requirements for reliable solid sample analysis. The sample is laser ablated in an air-tight cell and the aerosol is carried by an inert gas to a micro-wave induced plasma where its constituents are atomized and ionized prior to mass analysis. The 193 nm excimer laser ablation, in particular, provides athermal sample ablation with very precise lateral ablation and controlled depth profiling. The high photon energy and beam homogeneity of the 193 nm excimer laser system avoids elemental fractionation and permits clean ablation of even transmissive solid materials such as carbonates, fluorites and pure quartz.

  3. Excimer lasers for superhigh NA 193-nm lithography

    NASA Astrophysics Data System (ADS)

    Paetzel, Rainer; Albrecht, Hans S.; Lokai, Peter; Zschocke, Wolfgang; Schmidt, Thomas; Bragin, Igor; Schroeder, Thomas; Reusch, Christian; Spratte, Stefan

    2003-06-01

    Excimer lasers are widely used as the light source for microlithography scanners. The volume shipment of scanner systems using 193nm is projected to begin in year 2003. Such tools will directly start with super high numerical aperture (NA) in order to take full advantage of the 193nm wavelength over the advanced 248nm systems. Reliable high repetition rate laser light sources enabling high illumination power and wafer throughput are one of the fundamental prerequisites. In addition these light sources must support a very high NA imaging lens of more than 0.8 which determines the output spectrum of the laser to be less than 0.30 pm FWHM. In this paper we report on our recent progress in the development of high repetition rate ultra-narrow band lasers for high NA 193nm microlithography scanners. The laser, NovaLine A4003, is based on a Single Oscillator Ultral Line-narrowed (SOUL) design which yields a bandwidth of less than 0.30pm FWHM. The SOUL laser enables superior optical performance without adding complexity or cost up to the 4 kHz maximum repetition rate. The A4003's high precision line-narrowing optics used in combination with the high repetition rate of 4 kHz yields an output power of 20 W at an extremely narrow spectral bandwidth of less than 0.30 pm FWHM and highest spectral purity of less than 0.75 pm for the 95% energy content. We present performance and reliability data and discuss the key laser parameters. Improvements in the laser-internal metrology and faster regulation control result in better energy stability and improved overall operation behavior. The design considerations for line narrowing and stable laser operation at high repetition rates are discussed.

  4. Technique for cellular microsurgery using the 193-nm excimer laser.

    PubMed

    Palanker, D; Ohad, S; Lewis, A; Simon, A; Shenkar, J; Penchas, S; Laufer, N

    1991-01-01

    A new cell surgery technique has been developed to produce well-defined alterations in cells and tissue without detectable heating and/or other structural damage in the surroundings. The technique involves the use of an argon fluoride excimer laser, in the deep ultraviolet (UV) region of the spectrum at 193 nm, which is guided through a glass pipette filled with a positive air pressure. To demonstrate the method, holes were drilled in the zona pellucida of mouse oocytes. The diameter of the drilled hole was determined by the pipette tip size, and its depth by an energy emitted per pulse and number of pulses. Scanning electron microscopy of the drilled mouse oocytes showed uniform, round, well-circumscribed holes with sharp edges. Oocytes that had their zona pellucida drilled with this new method fertilized in vitro and developed to the blastocyst stage in a rate similar to that of control group. These results demonstrate the nonperturbing nature of this cold laser microsurgical procedure. In addition to the extension of our results for clinical in vitro fertilization purposes, such as enhancement of fertilization and embryo biopsy, there are wide-ranging possible uses of our method in fundamental and applied investigations that require submicron accuracy in cellular alteration.

  5. 193 nm Excimer laser processing of Si/Ge/Si(100) micropatterns

    NASA Astrophysics Data System (ADS)

    Gontad, F.; Conde, J. C.; Chiussi, S.; Serra, C.; González, P.

    2016-01-01

    193 nm Excimer laser assisted growth and crystallization of amorphous Si/Ge bilayer patterns with circular structures of 3 μm diameter and around 25 nm total thickness, is presented. Amorphous patterns were grown by Laser induced Chemical Vapor Deposition, using nanostencils as shadow masks and then irradiated with the same laser to induce structural and compositional modifications for producing crystalline SiGe alloys through fast melting/solidification cycles. Compositional and structural analyses demonstrated that pulses of 240 mJ/cm2 lead to graded SiGe alloys with Si rich discs of 2 μm diameter on top, a buried Ge layer, and Ge rich SiGe rings surrounding each feature, as predicted by previous numerical simulation.

  6. The interaction of 193-nm excimer laser irradiation with single-crystal zinc oxide: Neutral atomic zinc and oxygen emission

    SciTech Connect

    Kahn, E. H.; Langford, S. C.; Dickinson, J. T.; Boatner, Lynn A

    2013-01-01

    We report mass-resolved time-of-flight measurements of neutral particles from the surface of single-crystal ZnO during pulsed 193-nm irradiation at laser fluences below the threshold for avalanche breakdown. The major species emitted are atomic Zn and O. We examine the emissions of atomic Zn as a function of laser fluence and laser exposure. Defects at the ZnO surface appear necessary for the detection of these emissions. Our results suggest that the production of defects is necessary to explain intense sustained emissions at higher fluence. Rapid, clean surface etching and high atomic zinc kinetic energies seen at higher laser fluences are also discussed.

  7. Surface modification of a MoSiON phase shift mask to reduce critical dimension variation after exposure to a 193-nm ArF excimer laser

    NASA Astrophysics Data System (ADS)

    Choo, Hyeokseong; Seo, Dongwan; Lim, Sangwoo

    2014-08-01

    Introduction of a MoSi-based phase shift mask (PSM) improves photolithography resolution by causing light to shift phase by 180° thus canceling the overlap. However, when MoSiON PSM was exposed to an ArF excimer laser (λ = 193 nm), a significant increase in patterned critical dimension (CD) was observed. It was confirmed that the CD increase resulted from oxidation progression into the MoSiON layer. In this study, N2O or NH3 plasma treatment and thermal annealing in NH3 effectively suppressed CD variation after ArF laser exposure. While the compositional ratio of Si, N, O, and Mo elements in the MoSiON layer was not changed, an increase in oxygen content only in the top 5 nm was observed. Therefore, it is concluded that slight oxidation of the top surface of MoSiON PSM by introducing either N2O or NH3 plasma treatment or thermal annealing in NH3 suppresses an increase in the patterned CD of MoSiON PSM after exposure to a 193-nm ArF excimer laser.

  8. Development of high coherence high power 193nm laser

    NASA Astrophysics Data System (ADS)

    Tanaka, Satoshi; Arakawa, Masaki; Fuchimukai, Atsushi; Sasaki, Yoichi; Onose, Takashi; Kamba, Yasuhiro; Igarashi, Hironori; Qu, Chen; Tamiya, Mitsuru; Oizumi, Hiroaki; Ito, Shinji; Kakizaki, Koji; Xuan, Hongwen; Zhao, Zhigang; Kobayashi, Yohei; Mizoguchi, Hakaru

    2016-03-01

    We have been developing a hybrid 193 nm ArF laser system that consists of a solid state seeding laser and an ArF excimer laser amplifier for power-boosting. The solid state laser consists of an Yb-fiber-solid hybrid laser system and an Er-fiber laser system as fundamentals, and one LBO and three CLBO crystals for frequency conversion. In an ArF power amplifier, the seed laser passes through the ArF gain media three times, and an average power of 110 W is obtained. As a demonstration of the potential applications of the laser, an interference exposure test is performed.

  9. Evaluation of corneal ablation by an optical parametric oscillator (OPO) at 2.94 μm and an Er:YAG laser and comparison to ablation by a 193-nm excimer laser

    NASA Astrophysics Data System (ADS)

    Telfair, William B.; Hoffman, Hanna J.; Nordquist, Robert E.; Eiferman, Richard A.

    1998-06-01

    Purpose: This study first evaluated the corneal ablation characteristics of (1) an Nd:YAG pumped OPO (Optical Parametric Oscillator) at 2.94 microns and (2) a short pulse Er:YAG laser. Secondly, it compared the histopathology and surface quality of these ablations with (3) a 193 nm excimer laser. Finally, the healing characteristics over 4 months of cat eyes treated with the OPO were evaluated. Methods: Custom designed Nd:YAG/OPO and Er:YAG lasers were integrated with a new scanning delivery system to perform PRK myopic correction procedures. After initial ablation studies to determine ablation thresholds and rates, human cadaver eyes and in-vivo cat eyes were treated with (1) a 6.0 mm Dia, 30 micron deep PTK ablation and (2) a 6.0 mm Dia, -5.0 Diopter PRK ablation. Cadaver eyes were also treated with a 5.0 mm Dia, -5.0 Diopter LASIK ablation. Finally, cats were treated with the OPO in a 4 month healing study. Results: Ablation thresholds below 100 mJ/cm2 and ablation rates comparable to the excimer were demonstrated for both infrared systems. Light Microscopy (LM) showed no thermal damage for low fluence treatments, but noticeable thermal damage at higher fluences. SEM and TEM revealed morphologically similar surfaces for low fluence OPO and excimer samples with a smooth base and no evidence of collagen shrinkage. The Er:YAG and higher fluence OPO treated samples revealed more damage along with visible collagen coagulation and shrinkage in some cases. Healing was remarkably unremarkable. All eyes had a mild healing response with no stromal haze and showed topographic flattening. LM demonstrated nothing except a moderate increase in keratocyte activity in the upper third of the stroma. TEM confirmed this along with irregular basement membranes. Conclusions: A non- thermal ablation process called photospallation is demonstrated for the first time using short pulse infrared lasers yielding damage zones comparable to the excimer and healing which is also comparable to

  10. Ablation of poly(methyl methacrylate) and poly(2-hydroxyethyl methacrylate) by 308, 222 and 193 nm excimer-laser radiation

    NASA Astrophysics Data System (ADS)

    Costela, A.; Figuera, J. M.; Florido, F.; García-Moreno, I.; Collar, E. P.; Sastre, R.

    1995-03-01

    Data on the ablation of Poly(Methyl MetAcylate) (PMMA) and Poly(2-Hydroxyethyl MetAcylate) (PHEMA) with 0%, 1% and 20% of Ethylene Glycol DiMethAcrylate (EGDMA) as crosslinking monomer by 193, 222 and 308 nm laser radiation are presented. Direct photoetching of PMMA at 308 nm is demonstrated for laser fluences ranging from 2 to 18 J/cm2. The ablation rate of PHEMA is lower than the corresponding to PMMA and decreases when the amount of EGDMA increases. The determination of the absorbed energy density required to initiate significant ablation suggests that the photoetching mechanism is similar for all the polymers studied and is a function of the irradiation wavelength. The Beer-Lambert law, the Srinivasan, Smrtic and Babu (SSB) theory and the kinetic model of the moving interface are used to analyze the experimental results. It is shown that only the moving interface theory fits well the etch rate for all the selected polymers at the three radiation wavelengths.

  11. Tellurite glass thin films on silica and polymer using UV (193 nm) pulsed laser ablation

    NASA Astrophysics Data System (ADS)

    Zhao, Zhanxiang; Jose, Gin; Steenson, Paul; Bamiedakis, Nikos; Penty, Richard V.; White, Ian H.; Jha, Animesh

    2011-03-01

    Erbium-doped tellurite glass thin films were deposited using excimer (193 nm) laser ablation onto two different types of substrates: silica and polymer-coated silica for engineering optical integrated active-passive devices. The deposition conditions were optimized for both substrates in order to produce high-quality rare-earth (Er3+) ion-doped glass thin films with low propagation loss. The optical and spectroscopic properties of the deposited films, namely transmittance, fluorescence, lifetime as well as refractive indices at 633 nm were measured and analysed in detail.

  12. Collateral damage-free debridement using 193nm ArF laser

    NASA Astrophysics Data System (ADS)

    Wynne, James J.; Felsenstein, Jerome M.; Trzcinski, Robert; Zupanski-Nielsen, Donna; Connors, Daniel P.

    2011-03-01

    Burn eschar and other necrotic areas of the skin and soft tissue are anhydrous compared to the underlying viable tissue. A 193 nm ArF excimer laser, emitting electromagnetic radiation at 6.4 eV at fluence exceeding the ablation threshold, will debride such necrotic areas. Because such radiation is strongly absorbed by aqueous chloride ions through the nonthermal process of electron photodetachment, debridement will cease when hydrated (with chloride ions) viable tissue is exposed, avoiding collateral damage to this tissue. Such tissue will be sterile and ready for further treatment, such as a wound dressing and/or a skin graft.

  13. Controlling H atom production in the 193 nm laser photolysis of triethylarsenic

    NASA Astrophysics Data System (ADS)

    Xu, Xiaodong; Deshmukh, Subhash; Brum, Jeffrey L.; Koplitz, Brent

    1991-05-01

    We report on the production of atomic hydrogen subsequent to the 193 nm photolysis of triethylarsenic (TEAs) using an excimer laser. The H atoms are probed via two-photon (121.6+364.7 nm) ionization, and the resulting H atom Doppler profile at Lyman-α is presented. Photolysis power dependence studies demonstrate that substantial H atom formation occurs at relatively low laser powers. However, the H atom signal actually begins to diminish as the photolysis laser power is increased beyond ˜70 MW/cm2. Correlations with time-of-fight mass spectral data suggest that ion channels are being accessed. The possible mechanisms for TEAs excitation that lead to H atom formation/depletion are presented, and the implications of these observations on controlling carbon incorporation in the laser-enhanced growth of films of GaAs, AlGaAs, etc. are discussed.

  14. Improving vacuum-UV (VUV) photolysis of organic compounds in water with a phosphor converted xenon excimer lamp emitting at 193 nm.

    PubMed

    Schulze-Hennings, U; Pötschke, L; Wietor, C; Bringmann, S; Braun, N; Hayashi, D; Linnemann, V; Pinnekamp, J

    A novel vacuum ultraviolet excimer lamp emitting light at 193 nm was used to investigate the degradation of organic micropollutants in ultrapure water and wastewater treatment plant (WWTP) effluent. Overall, light at 193 nm proved to be efficient to degrade the investigated micropollutants (diclofenac, diatrizoic acid, sulfamethoxazole). Experiments with WWTP effluent proved the ability of radiation at 193 nm to degrade micropollutants which are hardly removed with commonly used oxidation technologies like ozonation (diatrizoic acid, ethylenediaminetetraacetic acid, perfluorooctanoic acid, and perfluorooctanesulfonic acid).

  15. Long Coherence Length 193 nm Laser for High-Resolution Nano-Fabrication

    DTIC Science & Technology

    2008-06-27

    ns pulses, considering Kerr self phase modulation and perhaps Kramers- Kronig self phase modulation as well? What conversion efficiency to 193.4 nm is...Kramers- Kronig phase related to Actinix 31 6/27/2008 Long Coherence Length 193-nm Laser for High-Resolution Nano-Fabrication DARPA Phase I STTR Final...by. Usually the n 2 contribution is the larger of the two, and better characterized. I do not include a Kramers- Kronig contribution in the

  16. Excimer lasers

    NASA Technical Reports Server (NTRS)

    Palmer, A. J.; Hess, L. D.; Stephens, R. R.

    1976-01-01

    A theoretical and experimental investigation into the possibility of achieving CW discharge pumped excimer laser oscillation is reported. Detailed theoretical modeling of capillary discharge pumping of the XeF and KXe and K2 excimer systems was carried out which predicted the required discharge parameters for reaching laser threshold on these systems. Capillary discharge pumping of the XeF excimer system was investigated experimentally. The experiments revealed a lower excimer level population density than predicted theoretically by about an order of magnitude. The experiments also revealed a fluorine consumption problem in the discharge in agreement with theory.

  17. Excimer lasers

    NASA Technical Reports Server (NTRS)

    Palmer, A. J.; Hess, L. D.; Stephens, R. R.; Pepper, D. M.

    1977-01-01

    The results of a two-year investigation into the possibility of developing continuous wave excimer lasers are reported. The program included the evaluation and selection of candidate molecular systems and discharge pumping techniques. The K Ar/K2 excimer dimer molecules and the xenon fluoride excimer molecule were selected for study; each used a transverse and capillary discharges pumping technique. Experimental and theoretical studies of each of the two discharge techniques applied to each of the two molecular systems are reported. Discharge stability and fluorine consumption were found to be the principle impediments to extending the XeF excimer laser into the continuous wave regime. Potassium vapor handling problems were the principal difficulty in achieving laser action on the K Ar/K2 system. Of the four molecular systems and pumping techniques explored, the capillary discharge pumped K Ar/K2 system appears to be the most likely candidate for demonstrating continuous wave excimer laser action primarily because of its predicted lower pumping threshold and a demonstrated discharge stability advantage.

  18. Detection of OH radical in laser induced photodissociation of tetrahydrofuran at 193 nm

    NASA Astrophysics Data System (ADS)

    SenGupta, Sumana; Upadhyaya, Hari P.; Kumar, Awadhesh; Naik, Prakash D.; Bajaj, Paramanand

    2005-03-01

    On excitation at 193nm, tetrahydrofuran (THF) generates OH as one of the photodissociation products. The nascent energy state distribution of the OH radical was measured employing laser induced fluorescence technique. It is observed that the OH radical is formed mostly in the ground vibrational level, with low rotational excitation (˜3%). The rotational distribution of OH (v″=0,J) is characterized by rotational temperature of 1250±140K. Two spin-orbit states, Π3/22 and Π1/22 of OH are populated statistically. But, there is a preferential population in Λ doublet levels. For all rotational numbers, the Π+2(A') levels are preferred to the Π-2(A″) levels. The relative translational energy associated with the photoproducts in the OH channel is calculated to be 17.4±2.2kcalmol-1, giving an fT value of ˜36%, and the remaining 61% of the available energy is distributed in the internal modes of the other photofragment, i.e., C4H7. The observed distribution of the available energy agrees well with a hybrid model of energy partitioning, predicting an exit barrier of ≈16kcalmol-1. Based on both ab initio molecular orbital calculations and experimental results, a plausible mechanism for OH formation is proposed. The mechanism involves three steps, the C-O bond cleavage of the ring, H atom migration to the O atom, and the C-OH bond scission, in sequence, to generate OH from the ground electronic state of THF. Besides this high energy reaction channel, other photodissociation channels of THF have been identified by detecting the stable products, using Fourier transform infrared and gas chromatography.

  19. Development of high coherence, 200mW, 193nm solid-state laser at 6 kHz

    NASA Astrophysics Data System (ADS)

    Nakazato, T.; Tsuboi, M.; Onose, T.; Tanaka, Y.; Sarukura, N.; Ito, S.; Kakizaki, K.; Watanabe, S.

    2015-02-01

    The high coherent, high power 193-nm ArF lasers are useful for interference lithography and microprosessing applications. In order to achieve high coherence ArF lasers, we have been developing a high coherence 193 nm solid state laser for the seeding to a high power ArF laser. We used the sum frequency mixing of the fourth harmonic (FH) of a 904-nm Ti:sapphire laser with a Nd:YVO4 laser (1342 nm) to generate 193-nm light. The laser system consists of a single-mode Ti:sapphire oscillator seeded by a 904-nm external cavity laser diode, a Pockels cell, a 6-pass amplifier, a 4-pass amplifier, a 2-pass amplifier and a wavelength conversion stage. The required repetition rate of 6 kHz corresponding to the ArF laser, along with a low gain at 904 nm induces serious thermal lens effects; extremely short focal lengths of the order of cm and bi-foci in the vertical and horizontal directions. From the analysis of thermal lens depending on pump intensity, we successfully compensated the thermal lens by dividing a 527-nm pump power with 15, 25 and 28 W to 3-stage amplifiers with even passes, resulting in the output power above 10W with a nearly diffraction limited beam. This 904-nm output was converted to 3.8 W in the second harmonic by LBO, 0.5 W in FH by BBO sequentially. Finally the output power of 230 mW was obtained at 193 nm by mixing the FH with a 1342-nm light in CLBO.

  20. Measurement of initial absorption of fused silica at 193nm using laser induced deflection technique (LID)

    NASA Astrophysics Data System (ADS)

    Schönfeld, Dörte; Klett, Ursula; Mühlig, Christian; Thomas, Stephan

    2008-01-01

    The ongoing development in microlithography towards further miniaturization of structures creates a strong demand for lens material with nearly ideal optical properties. Beside the highly demanding requirements on homogeneity and stress induced birefringence (SIB), low absorption is a key factor. Even a small absorption is associated with a temperature increase and results in thermally induced local variations of refractive index and SIB. This could affect the achievable resolution of the lithographic process. The total absorption of the material is composed of initial absorption and of absorption induced during irradiation. Thus, the optimization of both improves the lifetime of the material. In principal, it is possible to measure transmission and scattering with a suitable spectrometer assembly and calculate absorption from them. However, owing to the influence of sample surfaces and errors of measurement, these methods usually do not provide satisfactory results for highly light-transmissive fused silica. Therefore, it is most desirable to find a technique that is capable of directly measuring absorption coefficients in the range of (1...10)•10 -4 cm -1 (base 10) directly. We report our first results for fused silica achieved with the LID technique. Besides a fused silica grade designed for 193 nm applications, grades with higher absorption at 193 nm were measured to test the LID technique. A special focus was set on the possibility of measuring initial absorption without the influence of degradation effects.

  1. Detection of sodium and potassium in single human red blood cells by 193-nm laser ablative sampling: a feasibility demonstration.

    PubMed

    Ng, C W; Cheung, N H

    2000-01-01

    The feasibility of quantifying sodium and potassium in single human erythrocytes was demonstrated by spectrochemical analysis of emissions from plasmas produced by 193-nm laser ablation of blood cells confined in a sheath flow. In one scheme, single blood cells that happened to be in the ablation volume were sampled. In another scheme, individual blood cells were first sighted and then synchronously ablated downstream. Plasma emission spectra of single ablated cells were captured, and the ratios of the analyte line intensity to the root-mean-square fluctuation of the continuum background were measured to be about 18 for sodium and 30 for potassium.

  2. Electron stimulated desorption of the metallic substrate at monolayer coverage: Sensitive detection via 193 nm laser photoionization of neutral aluminum desorbed from CH3O/Al(111)

    NASA Astrophysics Data System (ADS)

    Young, C. E.; Whitten, J. E.; Pellin, M. J.; Gruen, D. M.; Jones, P. L.

    A fortuitous overlap between the gain profile of the 193 nm ArF excimer laser and the Al autoionizing transition (sup 2)S(sub 1/2) (512753/cm) yields to the left (sup 2)P(sup 0)J has been exploited in the direct observation of substrate metal atoms in an electron simulated desorption (ESD) process from the monolayer adsorbate system CH3O/Al(111). The identity of the mass 27 photoion was established as Al(+) by (1) isotopic substitution of C-13 in the methanol employed for methoxy formation, and (2) tunable laser scans utilizing the DJ-2 (J = 3/2, 5/2) intermediate levels at approximately 32436/cm and a 248 nm ionization step. An ESD yield of approximately x 10(exp -6) Al atoms/(electron at 1 keV) was established by comparison with a sputtering experiment in the same apparatus. Velocity distributions measured for the desorbed Al species showed some differences in comparison with methoxy velocity data: a slightly lower peak velocity and a significantly less prominent high-velocity component.

  3. Effect of excimer laser on microbiological organisms

    SciTech Connect

    Keates, R.H.; Drago, P.C.; Rothchild, E.J.

    1988-10-01

    The effect of radiation emitted from an excimer laser filled with argon fluoride gas at 193 nm on Serratia marcescens, Pseudomonas aeruginosa, Staphylococcus aureus, streptococcus faecalis, Hemophilus influenzae, Candida albicans, and Aspergillus niger (collectively labeled the microorganisms) was examined. Colonies were subjected to a variable number of radiation pulses from the excimer laser applied after a 36-hour period of incubation at 37 degrees C, at which time the colonies were fully grown and showed no viability. The lack of viability was confirmed with a subculture from each area that received radiation; all subcultures were negative. The characteristics of the radiation paralleled those used by Serdavic, Darrell, Krueger, et al in 1985. This radiation treatment is believed to be within a therapeutic range, which suggests that the excimer laser, pending further investigation, may be useful in the treatment of corneal infections.

  4. A comparative study of corneal incisions induced by diamond and steel knives and two ultraviolet radiations from an excimer laser.

    PubMed Central

    Marshall, J; Trokel, S; Rothery, S; Krueger, R R

    1986-01-01

    This paper reviews the potential role of excimer lasers in corneal surgery. The morphology of incisions induced by two wavelengths of excimer laser radiation, 193 nm and 248 nm, are compared with the morphology of incisions produced by diamond and steel knives. Analysis suggests that ablation induced by excimer laser results from highly localised photochemical reactions and that 193 nm is the optimal wavelength for surgery. The only significant complication of laser surgery is loss of endothelial cells when incisions are within 40 micron of Descemet's membrane. Images PMID:3013283

  5. INTERACTION OF LASER RADIATION WITH MATTER: Rearrangement of a phosphosilicate glass network induced by the 193-nm radiation

    NASA Astrophysics Data System (ADS)

    Larionov, Yu V.; Sokolov, V. O.; Plotnichenko, V. G.

    2008-10-01

    The IR absorption and Raman spectra of phosphosilicate glass (PSG) are measured during its exposure to radiation at a wavelength of 193 nm. The obtained data demonstrate the complicated rearrangement dynamics of the glass network around phosphor atoms and of the glass network as a whole. The experimental dependences are explained by the model of the PSG network based on the concepts of the theory of rigidity percolation.

  6. Excimer Lasers In Medicine

    NASA Astrophysics Data System (ADS)

    Tittel, Frank K.; Saidi, Iyad S.; Pettit, George H.; Wisoff, P. J.; Sauerbrey, Roland A.

    1989-06-01

    Excimer lasers emit light energy, short optical pulses at ultraviolet wavelengths, that results in a unique laser tissue interaction. This has led to an increasing number of studies into medical applications of these lasers in fields such as ophthalmology, urology, cardiology and neurology.

  7. Preliminary characterisation of new glass reference materials (GSA-1G, GSC-1G, GSD-1G and GSE-1G) by laser ablation-inductively coupled plasma-mass spectrometry using 193 nm, 213 nm and 266 nm wavelengths

    USGS Publications Warehouse

    Guillong, M.; Hametner, K.; Reusser, E.; Wilson, S.A.; Gunther, D.

    2005-01-01

    New glass reference materials GSA-1G, GSC-1G, GSD-1G and GSE-1G have been characterised using a prototype solid state laser ablation system capable of producing wavelengths of 193 nm, 213 nm and 266 nm. This system allowed comparison of the effects of different laser wavelengths under nearly identical ablation and ICP operating conditions. The wavelengths 213 nm and 266 nm were also used at higher energy densities to evaluate the influence of energy density on quantitative analysis. In addition, the glass reference materials were analysed using commercially available 266 nm Nd:YAG and 193 nm ArF excimer lasers. Laser ablation analysis was carried out using both single spot and scanning mode ablation. Using laser ablation ICP-MS, concentrations of fifty-eight elements were determined with external calibration to the NIST SRM 610 glass reference material. Instead of applying the more common internal standardisation procedure, the total concentration of all element oxide concentrations was normalised to 100%. Major element concentrations were compared with those determined by electron microprobe. In addition to NIST SRM 610 for external calibration, USGS BCR-2G was used as a more closely matrix-matched reference material in order to compare the effect of matrix-matched and non matrix-matched calibration on quantitative analysis. The results show that the various laser wavelengths and energy densities applied produced similar results, with the exception of scanning mode ablation at 266 nm without matrix-matched calibration where deviations up to 60% from the average were found. However, results acquired using a scanning mode with a matrix-matched calibration agreed with results obtained by spot analysis. The increased abundance of large particles produced when using a scanning ablation mode with NIST SRM 610, is responsible for elemental fractionation effects caused by incomplete vaporisation of large particles in the ICP.

  8. Laser ablation of ceramic Al{sub 2}O{sub 3} at 193 nm and 248 nm: The importance of single-photon ionization processes

    SciTech Connect

    Pelaez, R. J.; Afonso, C. N.; Bator, M.; Lippert, T.

    2013-06-14

    The aim of this work is to demonstrate that single-photon photoionization processes make a significant difference in the expansion and temperature of the plasma produced by laser ablation of ceramic Al{sub 2}O{sub 3} in vacuum as well as to show their consequences in the kinetic energy distribution of the species that eventually will impact on the film properties produced by pulsed laser deposition. This work compares results obtained by mass spectrometry and optical spectroscopy on the composition and features of the plasma produced by laser ablation at 193 nm and 248 nm, i.e., photon energies that are, respectively, above and below the ionization potential of Al, and for fluences between threshold for visible plasma and up to Almost-Equal-To 2 times higher. The results show that the ionic composition and excitation of the plasma as well as the ion kinetic energies are much higher at 193 nm than at 248 nm and, in the latter case, the population of excited ions is even negligible. The comparison of Maxwell-Boltzmann temperature, electron temperatures, and densities of the plasmas produced with the two laser wavelengths suggests that the expansion of the plasma produced at 248 nm is dominated by a single population. Instead, the one produced at 193 nm is consistent with the existence of two populations of cold and hot species, the latter associated to Al{sup +} ions that travel at the forefront and produced by single photon ionization as well as Al neutrals and double ionized ions produced by electron-ion impact. The results also show that the most energetic Al neutrals in the plasma produced at the two studied wavelengths are in the ground state.

  9. Pulsed excimer laser processing

    NASA Technical Reports Server (NTRS)

    Wong, D.

    1985-01-01

    The status of pulsed excimer laser processing of PV cells is presented. The cost effective feasibility of fabricating high efficiency solar cells on Czochralski wafers using a pulsed excimer laser for junction formation, surface passivation, and front metallization. Laser annealing results were promising with the best AR coated cell having an efficiency of 16.1%. Better results would be expected with larger laser spot size because there was some degradation in open circuit voltage caused by laser spot overlap and edge effects. Surface heating and photolytic decomposition by the laser was used to deposit tungsten from the reaction of tungsten hexafluoride and hydrogen. The line widths were 5 to 10 mils, and the depositions passed the tape adhesion test. Thinner lines are practical using an optimized optical system.

  10. Pulsed excimer laser processing

    NASA Astrophysics Data System (ADS)

    Wong, D.

    1985-06-01

    The status of pulsed excimer laser processing of PV cells is presented. The cost effective feasibility of fabricating high efficiency solar cells on Czochralski wafers using a pulsed excimer laser for junction formation, surface passivation, and front metallization. Laser annealing results were promising with the best AR coated cell having an efficiency of 16.1%. Better results would be expected with larger laser spot size because there was some degradation in open circuit voltage caused by laser spot overlap and edge effects. Surface heating and photolytic decomposition by the laser was used to deposit tungsten from the reaction of tungsten hexafluoride and hydrogen. The line widths were 5 to 10 mils, and the depositions passed the tape adhesion test. Thinner lines are practical using an optimized optical system.

  11. Human excimer laser corneal surgery: preliminary report.

    PubMed Central

    L'Esperance, F A; Taylor, D M; Del Pero, R A; Roberts, A; Gigstad, J; Stokes, M T; Warner, J W; Telfair, W B; Martin, C A; Yoder, P R

    1988-01-01

    The first human trial utilizing the argon fluoride excimer laser at 193 nm to produce a superficial keratectomy in ten human eyes has been described with the histopathological evaluation of four eyes and the longer gross appearance of six eyes at intervals extending to 10 months post-excimer laser treatment. The process of laser superficial keratectomy has proved to be one of the promising areas of surgical intervention for reconstructive or refractive keratoplasty in the future. Intensive investigations need to be undertaken on the corneal wound healing process following laser ablation as well as the nature, and long-term stability of the corneal excisions or induced refractive corrections. It is essential that the optimal laser parameters be established for the various refractive corrections and other corneal surgical techniques, and that pathophysiologic and histopathologic changes that have been induced by the excimer laser-corneal tissue interaction in animals and humans be critically and extensively analyzed. Images FIGURE 1 FIGURE 19 A FIGURE 19 B FIGURE 20 A FIGURE 20 B FIGURE 21 A FIGURE 21 B FIGURE 22 A FIGURE 22 B FIGURE 23 FIGURE 24 FIGURE 25 FIGURE 26 FIGURE 27 FIGURE 28 FIGURE 29 A FIGURE 29 B FIGURE 29 C FIGURE 29 D FIGURE 30 A FIGURE 30 B FIGURE 31 A FIGURE 31 B FIGURE 32 FIGURE 33 FIGURE 34 FIGURE 35 FIGURE 36 FIGURE 37 A FIGURE 37 B FIGURE 37 C FIGURE 38 A FIGURE 38 B FIGURE 39 A FIGURE 39 B FIGURE 39 C FIGURE 40 A FIGURE 40 B PMID:2979049

  12. The Excimer Laser: Its Impact on Science and Industry

    NASA Astrophysics Data System (ADS)

    Basting, Dirk

    2010-03-01

    After the laser was demonstrated in 1960, 15 years were required to develop a practical method for extending laser emission into the UV: the Excimer laser. This historical review will describe the challenges with the new medium and provide an insight into the technological achievements. In the transition from Science to Industry it will be shown how start-ups successfully commercialized laboratory prototypes. The pioneers in this rapidly expanding field will be identified and the influence of government-funded research as well as the role of venture capital will be discussed. In scientific applications, the fields of photochemistry and material research were particularly stimulated by the advent of a reliable UV light source. Numerous industrial applications and worldwide research in novel applications were fueled In the early and mid 80's by progress in excimer laser performance and technology. The discovery of ablative photocomposition of polymer materials by Srinivasan at IBM opened the door to a multitude of important excimer applications. Micromachining with extreme precision with an excimer laser enabled the success of the inkjet printer business. Biological materials such as the human cornea can also be ``machined'' at 193nm, as proposed in 1983 by Trokel and Srinivasan. This provided the foundation of a new medical technology and an industry relying on the excimer laser to perform refractive surgery to correct vision Today, by far the largest use of the excimer laser is in photolithography to manufacture semiconductor chips, an application discovered by Jain at IBM in the early 80's. Moore's law of shrinking the size of the structure to multiply the number of transistors on a chip could not have held true for so long without the deep UV excimer laser as a light source. The presentation will conclude with comments on the most recent applications and latest market trends.

  13. Refractive index change during exposure for 193-nm chemically amplified resists

    NASA Astrophysics Data System (ADS)

    Oh, Hye-Keun; Sohn, Young-Soo; Sung, Moon-Gyu; Lee, Young-Mi; Lee, Eun-Mi; Byun, Sung Hwan; An, Ilsin; Lee, Kun-Sang; Park, In-Ho

    1999-06-01

    Some of the important areas to be improved for lithography simulation are getting correct exposure parameters and determining the change of refractive index. It is known that the real and imaginary refractive indices are changed during exposure. We obtained these refractive index changes during exposure for 193 nm chemically amplified resists. The variations of the transmittance as well as the resist thickness were measured during ArF excimer laser exposure. We found that the refractive index change is directly related to the concentration of the photo acid generator and de-protected resin. It is important to know the exact values of acid concentration from the exposure parameters since a small difference in acid concentration magnifies the variation in the amplified de-protection during post exposure bake. We developed and used a method to extract Dill ABC exposure parameters for 193 nm chemically amplified resist from the refractive index change upon exposure.

  14. An anti-reflection coating for use with PMMA at 193 nm

    NASA Technical Reports Server (NTRS)

    Yen, Anthony; Smith, Henry I.; Schattenburg, M. L.; Taylor, Gary N.

    1992-01-01

    An antireflection coating (ARC) for use with poly(methyl methacrylate) (PMMA) resist for ArF excimer laser lithography (193 nm) was formulated. It consists of PMMA and a bis-azide, 4.4-prime-diazidodiphenyl sulfone (DDS) which crosslinks the film after deep UV (260 nm) irradiation and subsequent annealing. The reacted DDS then serves as the absorber for the 193 nm radiation and also prevents mixing of the ARC and PMMA during PMMA spin-coating and development. The effectiveness of the ARC was demonstrated by exposing, in PMMA, using achromatic holographic lithography, gratings of 100 nm period (about 50 nm linewidth) that are almost entirely free of an orthogonal standing wave.

  15. Excimer laser treatment of corneal surface pathology: a laboratory and clinical study.

    PubMed Central

    Gartry, D.; Kerr Muir, M.; Marshall, J.

    1991-01-01

    The argon fluoride excimer laser emits radiation in the far ultraviolet part of the electromagnetic spectrum (193 nm). Each photon has high individual energy. Exposure of materials or tissues with peak absorption around 193 nm results in removal of surface layers (photoablation) with extremely high precision and minimal damage to non-irradiated areas. This precision is confirmed in a series of experiments on cadaver eyes and the treatment of 25 eyes with anterior corneal disease (follow-up 6 to 30 months). Multiple zone excimer laser superficial keratectomy is considered the treatment of choice for rough, painful corneal surfaces. All patients in this group were pain-free postoperatively. Where good visual potential exists, ablation of a single axial zone is recommended and results in improved visual acuity and reduction of glare. A hyperopic shift was noted in this group. Images PMID:1817467

  16. Applications of the 308-nm excimer laser in dermatology

    NASA Astrophysics Data System (ADS)

    Farkas, A.; Kemeny, L.

    2006-05-01

    Excimer lasers contain a mixture of a noble inert gas and a halogen, which form excited dimers only in the activated state. High-energy current is used to produce these dimers, which have a very short lifetime, and after their fast dissociation they release the excitation energy through ultraviolet photons. The application of these lasers proved to be successful in medicine, including the field of ophthalmology, cardiology, angiology, dentistry, orthopaedics, and, in recent years, dermatology. For medical purposes, the 193-nm argon fluoride, the 248-nm krypton fluoride, the 351-nm xenon fluoride, and the 308-nm xenon chloride lasers are used. Recently, the 308-nm xenon chloride laser has gained much attention as a very effective treatment modality in dermatological disorders. It was successfully utilized in psoriasis; later, it proved to be useful in handling other lightsensitive skin disorders and even in the treatment of allergic rhinitis. This review summarizes the possible applications of this promising tool in dermatology.

  17. Excimer laser-induced diamond graphitization for high-energy nuclear applications

    NASA Astrophysics Data System (ADS)

    Alemanno, E.; Caricato, A. P.; Chiodini, G.; Martino, M.; Ossi, P. M.; Spagnolo, S.; Perrino, R.

    2013-12-01

    In this work, we have studied the structure and the morphology of a graphite layer induced on the surface of a polycrystalline thermal grade CVD diamond by focusing a pulsed excimer laser operating at KrF (wavelength 248 nm) and ArF (wavelength 193 nm) mixtures. By micro-Raman and photoluminescence spectroscopies, as well as scanning electron microscopy, we reported the synthesis of a turbostratic t-graphite layer after irradiation with ArF laser. By contrast, irradiating with a KrF laser beam, we obtained a disordered graphite layer with 10 laser shots, while 200 consecutive laser pulses resulted in target ablation.

  18. New antireflective coatings for 193-nm lithography

    NASA Astrophysics Data System (ADS)

    Xu, Gu; Guerrero, Douglas J.; Dobson, Norman

    1998-06-01

    New bottom antireflective coatings (BARCs) for 193 nm lithography have been recently developed by Brewer Science Inc. Copolymers of benzyl methacrylate (or benzyl acrylate) and hydroxypropyl methacrylate have been synthesized and used as a main component in 193 nm BARCs. The acrylic copolymers have strong absorbance at 193 nm UV light wavelength. The 193 nm BARCs were formulated in safe solvents such as ethyl lactate and formed by spin-on coating process. Thermosetting of the 193 nm BARCs limited their intermixing with photoresists. These 193 nm BARCs had optical density of about 10 micrometers -1, k equals 0.35, and n equals 1.81. Preliminary oxygen plasma etch rates were > 1.5 times DUV resists. Good profiles at small feature sizes (< 0.20 micrometers ) were achieved with tested photoresists.

  19. Vacuum barrier for excimer lasers

    DOEpatents

    Shurter, Roger P.

    1992-01-01

    A barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yarns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput.

  20. Vacuum barrier for excimer lasers

    DOEpatents

    Shurter, R.P.

    1992-09-15

    A barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yarns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput. 3 figs.

  1. ArF excimer laser microprocessing of polymer optical fibers for photonic sensor applications

    NASA Astrophysics Data System (ADS)

    Athanasekos, Loukas; Vasileiadis, Miltiadis; El Sachat, Alexandros; Vainos, Nikolaos A.; Riziotis, Christos

    2015-01-01

    A study of polymer optical fiber microstructuring by use of deep ultraviolet excimer laser radiation at 193 nm wavelength is performed. The ablation characteristics of the fiber cladding and core materials are analyzed comparatively. The laser irradiation effects are dynamically studied by on-line monitoring of the laser ablation induced waveguiding losses, the latter being correlated with the spatial structuring parameters. The fiber surface is modified to incorporate cavities, which are subsequently employed as sensitive material receptors for the development of customized photonic sensors. The sensing capability of the microstructured plastic optical fibers is demonstrated by ammonia and humidity detection.

  2. Behavior of 157 nm excimer-laser-induced refractive index changes in silica

    SciTech Connect

    Smith, Charlene M.; Borrelli, Nicholas F.

    2006-09-15

    This study describes the observation of large induced refractive index changes produced by 157 nm excimer laser exposure in high-purity synthetic silica glasses. With 157 nm exposure, large induced changes are observed within a few hundred thousand pulses of exposure. Similar to 193 nm exposures, exposure with polarized 157 nm light yields polarization-induced birefringence (PIB). However, the 157 nm exposure also exhibits a behavior not observed with 193 nm exposures; namely, the initial response of the glass is a decrease in refractive index, followed by an increase with continued exposure. An explanation of the behaviors for both wavelength results is proposed where the induced refractive index is considered to arise from two different concurrent phenomena. One produces a decreased refractive index and also accounts for the PIB. The other, which accounts for the increased refractive index, is associated with an isotropic laser-induced volume change.

  3. Semiconductor processing with excimer lasers

    SciTech Connect

    Young, R.T.; Narayan, J.; Christie, W.H.; van der Leeden, G.A.; Rothe, D.E.; Cheng, L.J.

    1983-01-01

    The advantages of pulsed excimer lasers for semiconductor processing are reviewed. Extensive comparisons of the quality of annealing of ion-implanted Si obtained with XeCl and ruby lasers have been made. The results indicate that irrespective of the large differences in the optical properties of Si at uv and visible wavelengths, the efficiency of usage of the incident energy for annealing is comparable for the two lasers. However, because of the excellent optical beam quality, the XeCl laser can provide superior control of the surface melting and the resulting junction depth. Furthermore, the concentrations of electrically active point defects in the XeCl laser annealed region are 2 to 3 orders of magnitude lower than that obtained from ruby or Nd:YAG lasers. All these results seem to suggest that XeCl lasers should be suitable for fabricating not only solar cells but also the more advanced device structures required for VLSI or VHSIC applications.

  4. Absorption of 308-nm excimer laser radiation by balanced salt solution, sodium hyaluronate, and human cadaver eyes

    SciTech Connect

    Keates, R.H.; Bloom, R.T.; Schneider, R.T.; Ren, Q.; Sohl, J.; Viscardi, J.J. )

    1990-11-01

    Absorption of the excimer laser radiations of 193-nm argon fluorine and 308-nm xenon chloride in balanced salt solution, sodium hyaluronate, and human cadaver eyes was measured. The absorption of these materials as considerably different for the two wavelengths; we found that 308-nm light experienced much less absorption than the 193-nm light. The extinction coefficient (k) for 308 nm was k = 0.19/cm for balanced salt solution and k = 0.22/cm for sodium hyaluronate. In contrast to this, the extinction coefficient for 193 nm was k = 140/cm for balanced salt solution and k = 540/cm for sodium hyaluronate. Two 1-day-old human phakic cadaver eyes showed complete absorption with both wavelengths. Using aphakic eyes, incomplete absorption was noted at the posterior pole with 308 nm and complete absorption was noted with 193 nm. The extinction in the anterior part of aphakic eyes (the first 6 mm) was 4.2/cm for 308 nm, meaning that the intensity of the light is reduced by a factor of 10 after traveling the first 5.5 mm. However, we observed that the material in the eye fluoresces, meaning the 308 nm is transformed into other (longer) wavelengths that travel through the total eye with minimal absorption. Conclusions drawn from this experiment are that the use of the 308-nm wavelength may have undesirable side effects, while the use of the 193-nm wavelength should be consistent with ophthalmic use on both the cornea and the lens.

  5. Excimer laser in arthroscopic surgery

    NASA Astrophysics Data System (ADS)

    Koort, Hans J.

    1991-05-01

    The development of efficient high-power lasersystems for use in surgery, especially in arthroscopic fields, leads to a new push for all endoscopic techniques. Both techniques, laser and endoscope, complete each other in an ideal way and allow applications which could not be reached with conventional techniques. One of the newer laser types is the excimer laser, which will be a good choice for surface treatment because of its very considerate interaction with tissue. One example is the ablation or smoothing of articular cartilage and meniscal shaving in orthopaedics. On the other hand, the power of this laser system is high enough to cut tissue, for instance in the lateral release, and offers therefore an alternative to the mechanical and electrical instruments. All lasers can only work fine with effective delivery systems. Sometimes there is only a single fiber, which becomes very stiff at diameters of more than 800 micrometers . This fiber often allows only the tangential treatment of tissue, most of the laser power is lost in the background. New fiber systems with many, sometimes hundreds of very thin single fibers, could offer a solution. Special handpieces and fibersystems offer distinct advantages in small joint arthroscopy, especially those for use with excimer lasers will be discussed.

  6. Recent progress in 193-nm antireflective coatings

    NASA Astrophysics Data System (ADS)

    Meador, James D.; Guerrero, Douglas J.; Xu, Gu; Shao, Xie; Dobson, Norman; Claypool, James B.; Nowak, Kelly A.

    1999-06-01

    This paper presents the chemistries and properties of organic, spin-on, bottom antireflective coatings (BARCs) that are designed for 193 nm lithography. All of the BARCs are thermosetting and use dye-attached/incorporated polymers. A first generation product, NEXT, will soon be commercialized. NEXT is built form i-line and deep-UV chemistries with the polymeric constituent being a substitute novolac. This product provide outstanding resolution of 0.16 micrometers L/S with several 193 nm photoresists. Second generation chemical platforms under study include acrylics, polyesters, and polyethers with the 193 nm absorbing chromophore being an aromatic function. The performance of selected BARCs from the four platforms is described, including: optical properties, 193 nm litho, plasma etch rates, Prolith modeling data, spin-bowl and waste line compatibility, and ambient stability.

  7. Short-pulse excimer laser performances and its applications: I. ophthamology

    NASA Astrophysics Data System (ADS)

    Przybylski, Marius; Simon, Gabriel

    1997-05-01

    A new very small powerful air-cooled excimer laser (193, 248, 308 nm) with metal-ceramic technology was developed by ATL Lasertechnik in Germany. The laser won 1995 Prize for the best innovation awarded by German federal states of Berlin & Brandenburg. The pulse energy of 10 - 20 mJ at high rep rates (200 - 500 Hz) from an active volume of only 1 cm3 are reached. The raw laser beam produces energy density of > 100 mJ/cm2 which is comparable to the performance of standard (large) excimer lasers. Its very short pulse length (3 ns), permits extremely high peak power density (30 MW/cm2). The ATLEX SP laser uses a new type of pre-ionization technique providing high beam homogeneity at low discharge voltages. Small footprint and weight, low operation costs opens up new industrial (micro-machining) and biomedical applications. Recently the ATLEX SP laser (193 nm) has been used for corneal refractive surgery. The setup consists of splitting a 193 nm laser beam into couples of beams which simultaneously ablates the corneal surface in a symmetrical scan-like fashion. Refractive changes up to 20 diopters were realized. Results of an analysis by corneal topography showed homogeneous ablation throughout the entire ablation zone.

  8. Excimer laser chemical problems

    SciTech Connect

    Tennant, R.; Peterson, N.

    1982-01-01

    Techniques need to be developed to maintain XeF and XeCl laser performance over long periods of time without degradation resulting from chemical processes occurring within the laser. The dominant chemical issues include optical damage, corrosions of laser materials, gas contamination, and control of halogen concentration. Each of these issues are discussed and summarized. The methods of minimizing or controlling the chemical processes involved are presented.

  9. Excimer laser superficial keratectomy for proud nebulae in keratoconus.

    PubMed

    Moodaley, L; Liu, C; Woodward, E G; O'Brart, D; Muir, M K; Buckley, R

    1994-06-01

    Contact lens intolerance in keratoconus may be due to the formation of a proud nebula at or near the apex of the cone. Excimer laser superficial keratectomy was performed as an outpatients with proud nebulae as treatment patients with proud nebulae as treatment for their contact lens intolerance. The mean period of contact lens wear before the development of intolerance was 13.4 years (range 2 to 27 years). Following the development of intolerance, three patients abandoned contact lens wear in the affected eye while the remainder experienced a reduction in comfortable wearing time (mean = 3.75 hours; range: 0-14 hours). All patients had good potential Snellen visual acuity with a contact lens of 6/9 (nine eyes) and 6/12 (one eye). The proud nebulae were directly ablated with a 193 nm ArF excimer laser using a 1 mm diameter beam. Between 100-150 pulses were sufficient to ablate the raised area. Patients experienced no pain during the procedure and reported minimal discomfort postoperatively. In all cases flattening of the proud nebulae was achieved. Seven patients were able to resume regular contact lens wear (mean wearing time = 10.17 hours; range 8 to 16 hours). In three patients, resumption of contact lens wear was unsuccessful because of cone steepness. All patients achieved postoperative Snellen visual acuity of 6/12 or better with a contact lens. Four patients experienced a loss of one line in Snellen acuity. The mean follow up period was 8.3 months (range 2 to 17 months). Excimer laser superficial keratectomy is a useful technique for the treatment of contact lens intolerance caused by proud nebulae in patients with keratoconus. Penetrating keratoplasty is thus avoided.

  10. Quantitative solid sample analysis by ArF excimer laser ablation

    NASA Astrophysics Data System (ADS)

    Delmdahl, Ralph; von Oldershausen, Georg

    2005-06-01

    Reproducible and sensitive elemental analysis of solid samples is a crucial task in areas of geology (e.g. microanalysis of fluid inclusions), material sciences, industrial quality control as well as in environmental, forensic and biological studies. To date the most versatile detection method is mass-spectroscopic multi-element analysis. In order to obtain reproducible results, this requires transferring the solid sample into the gas-phase while preserving the sample's stoichiometric composition. Laser Ablation in combination with inductively coupled plasma-mass spectrometry (LA-ICP-MS) is a proven powerful technique to meet the requirements for reliable solid sample analysis. The sample is laser ablated in an air-tight cell and the aerosol is carried by an inert gas to a micro-wave induced plasma where its constituents are atomized and ionized prior to mass analysis. The 193 nm excimer laser ablation, in particular, provides athermal sample ablation with very precise lateral ablation and controlled depth profiling. The high photon energy and beam homogeneity of the 193 nm excimer laser system avoids elemental fractionation and permits clean ablation of even transmissive solid materials such as carbonates, fluorites and pure quartz.

  11. Effect of excimer laser radiant exposure on uniformity of ablated corneal surface.

    PubMed

    Fantes, F E; Waring, G O

    1989-01-01

    The argon fluoride (193 nm) excimer laser is being used to change the anterior corneal curvature for correction of refractive errors. Uniformity of the surface following laser ablation may play an important role in the rate of epithelial healing and amount and type of stromal scarring. To test the effect of radiant exposure (fluence) on surface smoothness, we ablated rabbit corneas with the 193 nm argon fluoride excimer laser at nine radiant exposures from 50 to 850 mJ/cm2. A total energy of 100 J/cm2 was used for each ablation at a frequency of 1 Hz. Scanning electron microscopy demonstrated progressive improvement of surface smoothness with increasing radiant exposures. Transmission electron microscopy demonstrated no consistent increase in thickness to the surface condensate (pseudomembrane) with increasing radiant exposure. Improvement in surface quality associated with increasing radiant exposures may result from a more uniform depth of ablation per pulse in the corneal lamellae that absorb laser wavelengths differently. Radiant exposures at levels where the depth of ablation is the same regardless of increasing energy densities achieve a more uniform surface because inhomogeneities in the beam and variation in energy from pulse to pulse do not affect the ablation rate.

  12. Detection of lead in soil with excimer laser fragmentation fluorescence spectroscopy (ELFFS)

    SciTech Connect

    Choi, J.H.; Damm, C.J.; O'Donovan, N.J.; Sawyer, R.F.; Koshland, C.P.; Lucas, D.

    2004-03-01

    Excimer laser fragmentation fluorescence spectroscopy (ELFFS) is used to monitor lead in soil sample and investigate laser-solid interactions. Pure lead nitrate salt and soil doped with lead nitrate are photolyzed with 193 nm light from an ArF excimer at fluences from 0.4 to 4 J/cm{sup 2}. Lead emission is observed at 357.2, 364.0, 368.3, 373.9 and 405.8 nm. Time-resolved data show the decay time of the lead emission at 405.8 nm grows with increasing fluence, and a plasma is formed above fluences of 2 J/cm{sup 2}, where a strong continuum emission interferes with the analyte signal. Fluences below this threshold allow us to achieve a detection limit of approximately 200 ppm in soil.

  13. Excimer laser chemical ammonia patterning on PET film.

    PubMed

    Wu, G; Paz, M D; Chiussi, S; Serra, J; González, P; Wang, Y J; Leon, B

    2009-02-01

    Laser is a promising technique used for biopolymer surface modification with micro and/or nano features. In this work, a 193 nm excimer laser was used for poly (ethylene terephthalate) (PET) surfaces chemical patterning. The ablation threshold of the PET film used in the experiments was 62 mJ/cm(2) measured before surface modification. Surface chemical patterning was performed by irradiating PET film in a vacuum chamber filled with ammonia at the flux of 10, 15, 20, 25 ml/min. Roughness of the surface characterized by profilometry showed that there were no significant observed change after modification comparing original film. But the hydrophilicity of the surface increased after patterning and a minimum water contact angle was obtained at the gas flux of 20 ml/min. FT-IR/ATR results showed the distinct amino absorption bands presented at 3352 cm(-1)and 1613 cm(-1) after modification and XPS binding energies of C(1s) at 285.5 eV and N(1s) at 399.0 eV verified the existence of C-N bond formation on the PET film surface. Tof-SIMS ions mapping used to identify the amine containing fragments corroborates that amino grafting mainly happened inside the laser irradiation area of the PET surface. A hypothesized radical reaction mechanism proposes that the collision between radicals in ammonia and on the PET surface caused by the incident laser provokes the grafting of amino groups.

  14. AlGaAs growth by OMCVD using an excimer laser

    NASA Technical Reports Server (NTRS)

    Warner, Joseph D.; Wilt, David M.; Pouch, John J.; Aron, Paul R.

    1986-01-01

    AlGaAs has been grown on GaAs by laser assisted OMCVD using an excimer laser, wavelength 193 nm, and a Cambridge OMCVD reactor. Films were grown at temperatures of 450 and 500 C with the laser beam parallel to the surface and impinging onto the surface at 15 deg from parallel. The samples were heated by RF coils while the laser beam was perpendicular to the gas flow. Typical gas flow parameters are 12 slm of H2, 15 sccm of Ga(CH3)3, 13 sccm of Al(CH3)3, and a pressure of 250 mbar. The initial energy density of the beam at the surface was 40 mJ/sq cm, the pulse rate was 20 pps, and the growth time was 7 min. The films were analyzed by Auger electron spectroscopy for the aluminum concentration and by TEM for the surface morphology.

  15. Excimer laser induced surface chemical modification of polytetrafluoroethylene

    NASA Astrophysics Data System (ADS)

    Révész, K.; Hopp, B.; Bor, Z.

    1997-02-01

    Polytetrafluoroethylene has a notoriously non adhesive and non reactive character. Its successful surface photochemical modification was performed by irradiating the polytetrafluoroethylene/liquid triethylamine interface with an ArF excimer laser (λ=193 nm). Due to the photochemical treatment the polytetrafluoroethylene surface became more hydrophilic. The water receding contact angle decreased from 94° to 43°. The reaction cross section was determined from the decrease of the contact angles. It was found to be as high as 6.4×10-18 cm2. XPS measurements evidenced the removal of fluorine from the polytetrafluoroethylene, incorporation of alkyl carbon and nitrogen. Photochemical dissociation path of the triethylamine makes probable that it bonded to the fluoropolymer backbone via the α-carbon atom of an ethyl group. A radical, or a photoinduced electron transfer mechanism was suggested to describe this reaction. A selective area electroless plating of silver was performed after pretreating the sample with patterned photomodification. The increased adhesion of the sample was proved by gluing with epoxy resin. As a result of the surface modification the tensile strength of gluing increased by 210× and reached 24% of the value characteristic for the bulk material.

  16. Colouring fabrics with excimer lasers to simulate encoded images: the case of the Shroud of Turin

    NASA Astrophysics Data System (ADS)

    Di Lazzaro, P.; Baldacchini, G.; Fanti, G.; Murra, D.; Santoni, A.

    2008-10-01

    The faint body image embedded into the Turin Shroud has not yet explained by traditional science. We present experimental results of excimer laser irradiation (wavelengths 308 nm and 193 nm) of a raw linen fabric and of a linen cloth, seeking for a possible mechanism of image formation. The permanent coloration of both linens is a threshold effect on the laser beam intensity and it can be achieved only in a surprisingly narrow range of irradiation parameters: the shorter the wavelength, the narrower the range. We also obtained the first direct evidence of latent images impressed on linen that appear in a relatively long period (one year) after a laser irradiation that at first did not generate a clear image. The results are compared to the characteristics of the Turin Shroud, commenting the possibility that a burst of directional ultraviolet radiation may have played a role in the formation of the Shroud image.

  17. 308-nm excimer laser in endodontics

    NASA Astrophysics Data System (ADS)

    Liesenhoff, Tim

    1992-06-01

    Root canal preparation was performed on 20 extracted human teeth. After opening the coronal pulp, the root canals were prepared by 308 nm excimer laser only. All root canals were investigated under SEM after separation in the axial direction. By sagittal separation of the mandibles of freshly slaughtered cows, it was possible to get access to the tissues and irradiate under optical control. Under irradiation of excimer laser light, tissue starts to fluoresce. It was possible to demonstrate that each tissue (dentin, enamel, bone, pulpal, and connective tissue) has a characteristic spectral pattern. The SEM analyses showed that it is well possible to prepare root canals safely. All organic soft tissue has been removed by excimer laser irradiation. There was no case of via falsa. The simultaneous spectroscopic identification of the irradiated tissue provides a safe protection from overinstrumentation. First clinical trials on 20 patients suffering of chronical apical parodontitis have been carried out successfully.

  18. Modulation of corneal wound healing after excimer laser keratomileusis using topical mitomycin C and steroids

    SciTech Connect

    Talamo, J.H.; Gollamudi, S.; Green, W.R.; De La Cruz, Z.; Filatov, V.; Stark, W.J. )

    1991-08-01

    A 193-nm excimer laser system was used to create deep stromal ablations in seven New Zealand white rabbits and shallow ablations in three. Eyes were randomized for treatment with topical mitomycin C, steroids, and erythromycin; topical steroids and erythromycin; or topical erythromycin only. All treatment regimens were instituted twice daily for 14 days. All eyes reepithelialized normally within 3 to 5 days. During 10 weeks of follow-up, all eyes developed moderate reticular subepithelial haze without significant differences among treatment groups. Results of light, fluorescence, and electron microscopic examination showed anterior stromal scarring and markedly reduced new subepithelial collagen formation in the group treated with mitomycin C, corticosteroids, and erythromycin. Focal abnormalities of Descemet's membrane and endothelial abnormalities were present in all treatment groups. Combination therapy with topical steroids, mitomycin C, and erythromycin to control the corneal wound healing response after refractive laser surgery appears promising and warrants further study.

  19. Excimer laser texturing of natural composite polymer surfaces for studying cell-to-substrate specific response

    NASA Astrophysics Data System (ADS)

    Dinca, V.; Alloncle, P.; Delaporte, P.; Ion, V.; Rusen, L.; Filipescu, M.; Mustaciosu, C.; Luculescu, C.; Dinescu, M.

    2015-10-01

    Surface modifications of biocompatible materials are among the main factors used for enhancing and promoting specific cellular activities (e.g. spreading, adhesion, migration, and differentiation) for various types of medical applications such as implants, microfluidic devices, or tissue engineering scaffolds. In this work an excimer laser at 193 nm was used to fabricate chitosan-collagen roughness gradients. The roughness gradients were obtained in one step by applying single laser pulses and sample tilting. Fourier transform infrared spectroscopy measurements, atomic force microscopy (AFM), scanning electron microscopy (SEM), and spectro-ellipsometry (SE) were used for sample characterization. The goal is to determine the optimal morpho-chemical characteristics of these structures for in vitro tailoring of protein adsorption and cell behavior. The response induced by the roughness gradient onto various cell lines (i.e. L 929 fibroblasts, HEP G2 hepatocytes, OLN 93 oligodendrocytes, M63 osteoblasts) and bovine serum albumin (BSA) protein absorption was investigated.

  20. Binary 193nm photomasks aging phenomenon study

    NASA Astrophysics Data System (ADS)

    Dufaye, Félix; Sartelli, Luca; Pogliani, Carlo; Gough, Stuart; Sundermann, Frank; Miyashita, Hiroyuki; Hidenori, Yoshioka; Charras, Nathalie; Brochard, Christophe; Thivolle, Nicolas

    2011-05-01

    193nm binary photomasks are still used in the semiconductor industry for the lithography of some critical layers for the nodes 90nm and 65nm, with high volumes and over long period. These 193nm binary masks seem to be well-known but recent studies have shown surprising degrading effects, like Electric Field induced chromium Migration (EFM) [1] or chromium migration [2] [3] . Phase shift Masks (PSM) or Opaque MoSi On Glass (OMOG) might not be concerned by these effects [4] [6] under certain conditions. In this paper, we will focus our study on two layers gate and metal lines. We will detail the effects of mask aging, with SEM top view pictures revealing a degraded chromium edge profile and TEM chemical analyses demonstrating the growth of a chromium oxide on the sidewall. SEMCD measurements after volume production indicated a modified CD with respect to initial CD data after manufacture. A regression analysis of these CD measurements shows a radial effect, a die effect and an isolated-dense effect. Mask cleaning effectiveness has also been investigated, with sulphate or ozone cleans, to recover the mask quality in terms of CD. In complement, wafer intrafield CD measurements have been performed on the most sensitive structure to monitor the evolution of the aging effect on mask CD uniformity. Mask CD drift have been correlated with exposure dose drift and isolated-dense bias CD drift on wafers. In the end, we will try to propose a physical explanation of this aging phenomenon and a solution to prevent from it occurring.

  1. Excimer laser interaction with zinc oxide

    NASA Astrophysics Data System (ADS)

    Khan, Enamul Haque

    When single crystal ZnO is exposed to 193-nm laser photons in vacuum at fluences below 100 mJ/cm2, isolated Zn vacancies are produced due to the emission of energetic Zn+. The pair wise formation of Zn vacancies and Zn+ interstitials is attributed to the photochemical excitation of anti-bonding Zn-O bonds. Interstitial Zn + diffuses to the surface where it is loosely bound to the surface---often atop a photoionizable electron trap; adsorbed Zn+ is emitted when the underlying trap is photoionized. Isolated Zn vacancies also diffuse following the laser pulse. These electron traps can reduce the near-surface free carrier concentration by as much as a factor of five on irradiated samples. At fluences between 150 and 200 mJ/cm2, 193-nm irradiation produces sustained emission of ionic and neutral species. The near-surface region of the irradiated sample becomes increasingly metallic and zinc rich. At fluences in the 250--300 mJ/cm2 range, a slower component of the Zn+ emission appears which is attributed to the excitation of an auto-ionizing state at 12.77 eV. The same excitation also yields Zn atomic light emission, predominately due to transitions on the triplet manifold. Rydberg Zn* atoms in high-lying quantum states appear at a threshold fluence of about 350 mJ/cm2. At fluences greater than or equal to 2 J/cm2, atomic light emission due to optical breakdown is observed.

  2. Profile characteristics of excimer laser micromachined features

    NASA Astrophysics Data System (ADS)

    Tabat, Martin D.; O'Keeffe, Terence R.; Ho, Wen

    1993-04-01

    In our work with excimer lasers, we observe a complex depth profile in processed blind holes that is energy, material, and process independent. This feature occurs when processing ceramics, polyimide, semiconductors, and metals. Further it occurs under different optical configurations. An understanding of this phenomena is essential when micron-precision features are required. We present our findings and explore explanations.

  3. UV excimer laser photochemistry of hybrid organometallic compounds of gallium

    NASA Astrophysics Data System (ADS)

    Zhang, Y.; Cleaver, W. M.; Stuke, M.; Barron, A. R.

    1992-09-01

    The gas phase ultraviolet (UV) excimer laser induced photolysis of the gallium-alkyls Ga( t-C4H9) n - (CH3)3- n ( n=0, 1, 2, 3) was studied, using photolysis wavelengths of 308, 248, and 193 nm. The photofragments Ga, GaH, and GaCH3 were detected by laser ionization time-of-flight mass spectroscopy, while the hydrocarbon products CH4, C2H6, HC(CH3)3 and H2C=C(CH3)2 were identified using Fourier transform infrared (FTIR) spectroscopy. The formation of the GaH photofragment, and a high olefin-to-alkane product ratio, for Ga( t-C4H9)2(CH3) and Ga( t-C4H9)3 are interpreted to indicate a β-hydrogen elimination process. However, β-hydrogen elimination only occurs after fission of the weakest Ga-C bond, thus no β-hydride elimination is observed for Ga( t-C4H9)(CH3)2. Detection of C2H6 for Ga(CH3)3 and Ga( t-C4H9)(CH3)2, but not for Ga( t-C4H9)2(CH3), shows that under our experimental conditions the formation of ethane is as a result of the reductive elimination of the methyl groups, and is not due to the recombination of two free methyl radicals.

  4. Valacyclovir for the prevention of recurrent herpes simplex virus eye disease after excimer laser photokeratectomy.

    PubMed Central

    Asbell, P A

    2000-01-01

    PURPOSE: A variety of factors have been reported as inducing the reactivation of latent herpes simplex virus (HSV), among them stress, trauma, and UV radiation. Excimer laser photorefractive keratectomy (PRK) is a surgical procedure utilizing a 193 nm ultraviolet light to alter the curvature of the cornea and hence correct vision. Reactivation of ocular herpes simplex keratitis following such excimer laser PRK has been reported. All published cases of HSV reactivation following excimer laser treatment in humans are reviewed. The present study evaluates whether stress, trauma of the corneal de-epithelialization prior to the laser, or the excimer laser treatment itself to the stromal bed induces this ocular reactivation of the latent HSV, and whether a systemic antiviral agent, valacyclovir, would prevent such laser PRK-induced reactivation of the HSV. METHODS: Forty-three normal 1.5- to 2.5-kg New Zealand white rabbits were infected on the surface of the cornea with HSV-1, strain RE. The animals were monitored until resolution, and then all animals were divided into 5 treatment groups: (1) de-epithelialization only, intraperitoneal (i.p.) saline for 14 days; (2) de-epithelialization plus laser, i.p. saline for 14 days; (3) de-epithelialization plus laser, valacyclovir 50 mg/kg per day i.p. for 14 days; (4) de-epithelialization plus laser, valacyclovir 100 mg/kg per day i.p. for 14 days; (5) de-epithelialization plus laser, valacyclovir 150 mg/kg per day i.p. for 14 days. Animals were evaluated in a masked fashion by clinical examination biweekly and viral cultures biweekly through day 28. RESULTS: The reactivation rates were as follows: group 1, 0%; group 2, 67%; group 3, 50%; group 4, 17%; and group 5, 0%. Viral titers were negative in animals that had no reactivation but persistently positive in those that had reactivation (day 6 through day 28). CONCLUSIONS: Excimer laser (193 nm) treatment can trigger reactivation of ocular herpes disease (67%) and viral

  5. Pulsed laser deposition of polyhydroxybutyrate biodegradable polymer thin films using ArF excimer laser

    NASA Astrophysics Data System (ADS)

    Kecskemeti, G.; Smausz, T.; Kresz, N.; Tóth, Zs.; Hopp, B.; Chrisey, D.; Berkesi, O.

    2006-11-01

    We demonstrated the pulsed laser deposition (PLD) of high quality films of a biodegradable polymer, the polyhydroxybutyrate (PHB). Thin films of PHB were deposited on KBr substrates and fused silica plates using an ArF ( λ = 193 nm, FWHM = 30 ns) excimer laser with fluences between 0.05 and 1.5 J cm -2. FTIR spectroscopic measurements proved that at the appropriate fluence (0.05, 0.09 and 0.12 J cm -2), the films exhibited similar functional groups with no significant laser-produced modifications present. Optical microscopic images showed that the layers were contiguous with embedded micrometer-sized grains. Ellipsometric results determined the wavelength dependence ( λ ˜ 245-1000 nm) of the refractive index and absorption coefficient which were new information about the material and were not published in the scientific literature. We believe that our deposited PHB thin films would have more possible applications. For example to our supposal the thin layers would be applicable in laser induced forward transfer (LIFT) of biological materials using them as absorbing thin films.

  6. Nanosecond-time-response temperature measurements using radiation thermometry during 193-nm and 247-nm pulsed light irradiation: comparison of corneal surface temperature histories

    NASA Astrophysics Data System (ADS)

    Ishihara, Miya; Arai, Tsunenori; Sato, Shunichi; Morimoto, Yuji; Obara, Minoru; Kikuchi, Makoto

    2001-07-01

    We have developed the fast time-response measurement of thermal radiation with 15ns rise time to monitor the corneal surface temperature during ArF excimer laser ablation. In this study, e aim to investigate the influence of the relation between the corneal penetration depth and sampling depth of the measurement system on the measured temperature using 193 nm and 247 nm pulsed lights which have different penetration depths of cornea. When the sampling depth was defined as the penetration depth of cornea at the thermal radiation wavelength, we obtained about 3 micrometers of the sampling depth by pulsed photothermal radiometry (PPTR). In the case of the 247 nm light irradiation, where the corneal absorption coefficient at 247 nm was approximately equal to that for the thermal radiation, we found that the measured temperature rises were same as the estimated temperature rises based on the photothermal process. In contrast, in the case of the 193 nm light irradiation, where the absorption coefficient at 193 nm was larger than that for the thermal radiation, we found that the measured temperature rises were lower than the estimated temperature rises.

  7. New excimer laser technique for the correction of strabismus and diplopia

    NASA Astrophysics Data System (ADS)

    Azar, Dimitri T.

    1994-06-01

    We used the ArF excimer laser to determine the feasibility of performing prismatic photoablations in model eyes (plastic spheres simulating the eye), and in rabbit corneas. This would correct diplopia and small angles of deviation, and result in minimal refractive alterations. We modified excimer laser delivery system that achieved the desired corneal contour of prismatic ablations. 193-nm argon fluoride laser was used at fluence of 160 mJ/cm2 and ablation rate 5 Hz. 5.0-mm diameter, 40 um corneal epithelial ablation were followed by 5.0- mm diameter, prismatic photokeratectomy (PPK). We were able to achieve prismatic photoablation of PMMA blocks and lenses. No other refractive changes accompanied the prismatic photoablation of PMMA blocks and lenses. No other refractive changes accompanied the prismatic effect. In rabbits re-epithelialization of the 5-mm ablations was complete by day 3, and corneal haze was not observed by gross examination. Epithelial hyperplasia and subepithelial scarring were noted at the deep edges. PPK holds important therapeutic potential for fine-tuning results of conventional strabismus surgery, and for patients with stable diplopia following nerve palsy and ocular surgery.

  8. Putative photoacoustic damage in skin induced by pulsed ArF excimer laser

    SciTech Connect

    Watanabe, S.; Flotte, T.J.; McAuliffe, D.J.; Jacques, S.L.

    1988-05-01

    Argon-fluoride excimer laser ablation of guinea pig stratum corneum causes deeper tissue damage than expected for thermal or photochemical mechanisms, suggesting that photoacoustic waves have a role in tissue damage. Laser irradiation (193 nm, 14-ns pulse) at two different radiant exposures, 62 and 156 mJ/cm2 per pulse, was used to ablate the 15-microns-thick stratum corneum of the skin. Light and electron microscopy of immediate biopsies demonstrated damage to fibroblasts as deep as 88 and 220 microns, respectively, below the ablation site. These depths are far in excess of the optical penetration depth of 193-nm light (1/e depth = 1.5 micron). The damage is unlikely to be due to a photochemical mechanism because (a) the photons will not penetrate to these depths, (b) it is a long distance for toxic photoproducts to diffuse, and (c) damage is proportional to laser pulse intensity and not the total dose that accumulates in the residual tissue; therefore, reciprocity does not hold. Damage due to a thermal mechanism is not expected because there is not sufficient energy deposited in the tissue to cause significant heating at such depths. The damage is most likely due to a photoacoustic mechanism because (a) photoacoustic waves can propagate deep into tissue, (b) the depth of damage increases with increasing laser pulse intensity rather than with increasing total residual energy, and (c) the effects are immediate. These effects should be considered in the evaluation of short pulse, high peak power laser-tissue interactions.

  9. Excimer laser ablation of thick SiOx-films: Etch rate measurements and simulation of the ablation threshold

    NASA Astrophysics Data System (ADS)

    Ihlemann, J.; Meinertz, J.; Danev, G.

    2012-08-01

    Excimer laser ablation of 4.5 μm thick SiOx-films with x ≈ 1 is investigated at 193 nm, 248 nm, and 308 nm. Strong absorption enables precisely tunable removal depths. The ablation rates correlate with laser penetration depths calculated from low level absorption coefficients. The experimental ablation thresholds are in agreement with numerical simulations on the basis of linear absorption and one-dimensional heat flow. This behaviour is similar to that of strongly UV-absorbing polymers, leading to well controllable micro machining prospects. After laser processing, SiOx can be converted to SiO2, opening a route to laser based fabrication of micro optical components.

  10. Quantum dot intermixing using excimer laser irradiation

    SciTech Connect

    Djie, H. S.; Ooi, B. S; Gunawan, O.

    2006-08-21

    The authors report a spatial control of the band gap in InGaAs/GaAs quantum dots (QDs) using the combined effects of pulsed excimer laser irradiation and impurity-free dielectric cap induced intermixing technique. A large band gap shift of up to 180 meV has been obtained under laser irradiation of 480 mJ/cm{sup 2} and 150 pulses to the SiO{sub 2} capped shallow QD structure, while the nonirradiated SiO{sub 2} and Si{sub x}N{sub y} capped QDs only exhibit band gap shifts of 18 and 91 meV, respectively.

  11. Excimer laser surface processing of titanium

    SciTech Connect

    Jervis, T.R.; Hubbard, K.M.; Zocco, T.G.; Foster, L.; Nastasi, M.; Tesmer, J.R.

    1993-05-01

    We have examined the effect of laser surface processing of Ti alloys using pulsed excimer laser light at 248 nm. Thermal transformations of the surface are accomplished by heating the surface and rapid cooling. Alloying and formation of compounds can be obtained by melting and mixing surface layers into the material and by gas alloying. Multiple melting-resolidification cycles result in the inter-diffusion of surface layers in the liquid state and the diffusion of gas species into the material. The effect of alloying from both solid and gas sources and the effects of thermal transformations on the microstructure and surface hardness properties of these alloys will be examined.

  12. Excimer laser surface processing of titanium

    SciTech Connect

    Jervis, T.R.; Hubbard, K.M.; Zocco, T.G.; Foster, L.; Nastasi, M.; Tesmer, J.R.

    1993-01-01

    We have examined the effect of laser surface processing of Ti alloys using pulsed excimer laser light at 248 nm. Thermal transformations of the surface are accomplished by heating the surface and rapid cooling. Alloying and formation of compounds can be obtained by melting and mixing surface layers into the material and by gas alloying. Multiple melting-resolidification cycles result in the inter-diffusion of surface layers in the liquid state and the diffusion of gas species into the material. The effect of alloying from both solid and gas sources and the effects of thermal transformations on the microstructure and surface hardness properties of these alloys will be examined.

  13. Excimer laser irradiation of metal surfaces

    NASA Astrophysics Data System (ADS)

    Kinsman, Grant

    In this work a new method of enhancing CO2 laser processing by modifying the radiative properties of a metal surface is studied. In this procedure, an excimer laser (XeCl) or KrF) exposes the metal surface to overlapping pulses of high intensity, 10(exp 8) - 10(exp 9) W cm(exp -2), and short pulse duration, 30 nsec FWHM (Full Width Half Maximum), to promote structural and chemical change. The major processing effect at these intensities is the production of a surface plasma which can lead to the formation of a laser supported detonation wave (LSD wave). This shock wave can interact with the thin molten layer on the metal surface influencing to a varying degree surface oxidation and roughness features. The possibility of the expulsion, oxidation and redeposition of molten droplets, leading to the formation of micron thick oxide layers, is related to bulk metal properties and the incident laser intensity. A correlation is found between the expulsion of molten droplets and a Reynolds number, showing the interaction is turbulent. The permanent effects of these interactions on metal surfaces are observed through scanning electron microscopy (SEM), transient calorimetric measurements and Fourier transform infrared (FTIR) spectroscopy. Observed surface textures are related to the scanning procedures used to irradiate the metal surface. Fundamental radiative properties of a metal surface, the total hemispherical emissivity, the near-normal spectral absorptivity, and others are examined in this study as they are affected by excimer laser radiation. It is determined that for heavily exposed Al surface, alpha' (10.6 microns) can be increased to values close to unity. Data relating to material removal rates and chemical surface modification for excimer laser radiation is also discussed. The resultant reduction in the near-normal reflectivity solves the fundamental problem of coupling laser radiation into highly reflective and conductive metals such as copper and aluminum. The

  14. Photoinitiated decomposition of substituted ethylenes: The photodissociation of vinyl chloride and acrylonitrile at 193 nm

    SciTech Connect

    Blank, D.A.; Suits, A.G.; Lee, Y.T.

    1997-04-01

    Ethylene and its substituted analogues (H{sub 2}CCHX) are important molecules in hydrogen combustion. As the simplest {pi}-bonded hydrocarbons these molecules serve as prototypical systems for understanding the decomposition of this important class of compounds. The authors have used the technique of photofragment translational spectroscopy at beamline 9.0.2.1 to investigate the dissociation of vinyl chloride (X=Cl) and acrylonitrile (X=CN) following absorption at 193 nm. The technique uses a molecular beam of the reactant seeded in helium which is crossed at 90 degrees with the output of an excimer laser operating on the ArF transition, 193.3 nm. The neutral photoproducts which recoil out of the molecular beam travel 15.1 cm where they are photoionized by the VUV undulator radiation, mass selected, and counted as a function of time. The molecular beam source is rotatable about the axis of the dissociation laser. The authors have directly observed all four of the following dissociation channels for both systems: (1) H{sub 2}CCHX {r_arrow} H + C{sub 2}H{sub 2}X; (2) H{sub 2}CCHX {r_arrow} X + C{sub 2}H{sub 3}; (3) H{sub 2}CCHX {r_arrow} H{sub 2} + C{sub 2}HX; and (4) H{sub 2}CCHX {r_arrow} HX + C{sub 2}H{sub 2}. They measured translational energy distributions for all of the observed channels and measured the photoionization onset for many of the photoproducts which provided information about their chemical identity and internal energy content. In the case of acrylonitrile, selective product photoionization provided the ability to discriminate between channels 2 and 4 which result in the same product mass combination.

  15. The Photodissociation of Nitromethane at 193 nm.

    DTIC Science & Technology

    1983-02-28

    gas fill; the focus and alignment were kept constant. The dissociation products were detected in the plane of the laser and molecular beams by a...This background is presumably due to scattereo light from the intense laser dissociating or desorbing diffusion pump oil from the wall behind the...When dissociated , other nitroalkanes exhibit the same emission spectrum as CH3NO2, suggesting little transfer of energy from the excited NO2 group to

  16. Clinical experience with peripheral excimer laser angioplasty

    NASA Astrophysics Data System (ADS)

    Visona, Adriana; Cecchetti, Walter; Liessi, Guido; Miserocchi, Luigi; Bonanome, Andrea; Lusiani, Luigi; Mayellaro, Valeria; Pagnan, Antonio

    1993-06-01

    We used an excimer laser system (xenon-chloride at the wavelength of 308 nm) to treat totally occluded peripheral vessels in 71 patients. Energy was delivered through a multifiber catheter, which combines 12 (7F) or 18 (9F) fibers (260 (mu) diameter each), concentrically arranged. Balloon dilatation was associated to complete the procedure in 84% of the cases. The immediate success rate was 97%. The cumulative patency rate was 49% at one year. The major problems with this system were that the stiff multifiber tips caused dissections, and spasm; dead space/active space ratio of the catheter was unfavorable, allowing mechanical `dottering;' the maximum lumen obtained was considered inadequate. After this three year period, the goal of our clinical laser program is to develop a stand alone laser technique by employing a multifiber catheter which combines 130 - 150 fibers 100 (mu) diameter each, and features a quartz coated distal tip.

  17. High Spatial Resolution Analysis of Carbonates by In Situ Excimer Laser Ablation MC-ICP-MS

    NASA Astrophysics Data System (ADS)

    Shuttleworth, S.; Lloyd, N.; Douthitt, C.

    2012-12-01

    Speleothems are important climate archives. The time resolution of the paleochlimate proxies depends on the growth rates and the precision limitation of the analytical instrumentation [1]. As a consequence, for speleothems, better analytical precision combined with better spatial resolution will always be the goal, driven by a need to probe the timing and duration of climate events [1]. The Thermo Scientific NEPTUNE Plus with Jet Interface option offers unparalleled MC-ICP-MS sensitivity for heavy elements. An ion yield of >3 % has previously been reported for uranium solutions introduced by desolvating nebulizer[2]. For laser ablation Hf, the Jet Interface with N2 addition significantly improved sensitivity, which allowed precise and accurate 176Hf/177Hf ratios to be calculated using a spot size of just 25 μm diameter [3]. A Thermo Scientific NEPTUNE Plus with Jet Interface option was coupled with a Photon Machines excimer laser ablation system. This system features a short pulse width (4ns) 193 nm excimer laser and the HELEX 2 volume sample cell. The 193nm wavelength has been shown to reduce the particle size distribution of the aerosol produced by the laser ablation process [4] and this in turn has been shown to help minimize the effects of fractionation by ensuring that particles are in a size range so as to avoid incomplete vaporization and ionization in the plasma [5]. In this work we investigate U-Th dating of carbonates. Accurate LA U-Th isotope measurements on carbonates with U concentrations smaller than 1 μg/g are difficult due to small ion beams [1]. Hoffman et. al. [1] noted individual LA U-Th ratio precisions of about 2% (2 sigma) on a 134 ka sample with 134 μg/g U concentration. In this work we apply a combination of the high sampling efficiency two volume cell plus mixed gas plasmas to further enhance the capability. [1] Hoffman, D.L., et al. (2009). Chemical Geology. 259 253-261 [2] Bouman, C., et al. (2009). Geochim. Cosmochim. Acta. 73

  18. Excimer laser annealing for low-voltage power MOSFET

    NASA Astrophysics Data System (ADS)

    Chen, Yi; Okada, Tatsuya; Noguchi, Takashi; Mazzamuto, Fulvio; Huet, Karim

    2016-08-01

    Excimer laser annealing of lumped beam was performed to form the P-base junction for high-performance low-voltage-power MOSFET. An equivalent shallow-junction structure for the P-base junction with a uniform impurity distribution is realized by adopting excimer laser annealing (ELA). The impurity distribution in the P-base junction can be controlled precisely by the irradiated pulse energy density and the number of shots of excimer laser. High impurity activation for the shallow junction has been confirmed in the melted phase. The application of the laser annealing technology in the fabrication process of a practical low-voltage trench gate MOSFET was also examined.

  19. High power DUV lasers for material processing

    NASA Astrophysics Data System (ADS)

    Mimura, Toshio; Kakizaki, Kouji; Oizumi, Hiroaki; Kobayashi, Masakazu; Fujimoto, Junichi; Matsunaga, Takashi; Mizoguchi, Hakaru

    2016-11-01

    A frontier in laser machining has been required by material processing in DUV region because it is hard to get high power solid-state lasers in this spectral region. DUV excimer lasers are the only solution, and now the time has come to examine the new applications of material processing with DUV excimer lasers. The excimer lasers at 193nm and 248nm have been used in the semiconductor manufacturing for long years, and have field-proven stability and reliability. The high photon energy of 6.4 eV at 193nm is expected to interact directly with the chemical bond of hard-machining materials, such as CFRP, diamond and tempered glasses. We report the latest results of material processing by 193nm high power DUV laser.

  20. Control of structure and electric properties of amorphous organic semiconductive thin films prepared by excimer laser ablation

    NASA Astrophysics Data System (ADS)

    Nishio, S.; Sato, H.; Yamabe, T.

    Excimer laser ablation (ELA) of 3,4,9,10-perylene-tetracarboxylic dianhydride (PTCDA) with ArF (193 nm), KrF (248 nm), XeCl (308 nm), and XeF (351 nm) beams under optimized conditions enables us to obtain organic semiconductor thin films with various structures such as amorphous carbon, polyperinaphthalene (PPN), and PTCDA itself. Electric conductivity and carrier species of the films depend strongly on the ablation wavelength, fluence, substrate temperature, and ambient vapor species. It is found that electric conductivities of the films are controllable, ranging from 10-6 to 101 Scm-1 with the selection of appropriate ablation conditions. An organic pn junction is successfully constructed by the change of ablation conditions during ELA. Furthermore, ELA of PTCDA at 248 nm in iodine vapor leads to formation of tetraiodoallene in the film.

  1. In situ, real-time detection of soot particles coated with NaCl using 193 nm light

    NASA Astrophysics Data System (ADS)

    Choi, J. H.; Stipe, C. B.; Koshland, C. P.; Lucas, D.

    2006-09-01

    We report in situ, real-time detection of soot particles coated with NaCl using excimer laser fragmentation fluorescence spectroscopy (ELFFS). Carbon atom fluorescence at 248 nm and the Na D-line at 589 nm are used as signatures of soot and NaCl, respectively. Soot particles are encapsulated with a NaCl layer in a well-controlled inverted flame burner. NaCl particles are injected into the methane-air co-flow flame to coat the soot particles. ArF laser irradiation of the coated particles in an air stream at 1.14 J/cm2 produces fluorescence from Na, C, and CH. At 0.69 J/cm2, which is slightly above the fluorescence threshold, but not enough for considerable fragmentation of the particles, Na D-line persists with little carbon and no CH observed. These results suggest that the photolytic fragmentation-fluorescence using 193 nm excitation can be effectively used for in situ, real-time chemical analysis of core-shell nanoparticles.

  2. Preparatory study for detection of nickel in industrial flue gas by excimer laser-induced fragmentation fluorescence spectroscopy.

    PubMed

    Gottwald, U; Monkhouse, P

    2003-02-01

    The purpose of this work is to survey possibilities for detecting molecular nickel species in industrial flue gas using excimer laser-induced fragmentation fluorescence (ELIF), in particular to establish suitable detection schemes and to obtain a sensitivity estimate for Ni detection. Investigations were conducted in a heated laboratory cell under defined conditions of temperature and pressure, using NiCl2 as the precursor molecule. An ArF excimer laser (193 nm) was used for excitation and Ni atomic emission spectra were recorded in the range 300 to 550 nm. The dependence of ELIF signal on laser fluence was quadratic in the range of laser intensities investigated, as expected for a two-photon excitation process. The temporal behavior of the ELIF signals gave lifetimes significantly longer than the known natural lifetimes. This result and the energetics of the system suggest a Ni* production mechanism involving the formation of Ni+ and subsequent ion-electron recombination. The temperature dependence of the ELIF signal, determined in the range 773 to 1223 K, was found to follow the vapor-pressure curve (Antoine equation) known from the literature. Finally, quenching effects were investigated by measuring ELIF signals and lifetimes in nitrogen or air up to 1 atm. On the basis of the results so far, detection limits for Ni in practical combustion applications in the range of tens of ppb should be achievable, which will be sufficient for regulatory measurements in incinerators and power plants.

  3. Excimer laser crystallization of hydrogenated amorphous silicon

    SciTech Connect

    Dai Yongbing; Xu Zhongyang; Wang Changan; Zhang Shaoqiang; An Chengwu; Li Xingjiao; Wan Xinheng; Ding Hui

    1996-12-31

    Hydrogenated amorphous silicon (a-Si:H) films have been crystallized by the irradiations of XeCl excimer laser. The crystallized films have been examined by scanning electron microscopy (SEM), x-ray diffraction (XRD) and conductivity measurements to clarify their morphologies, structure and electrical properties. The results show that a high conductive super thin layer is formed by a single pulse laser irradiation with the energy density of 75mJ/cm{sup 2}. The conductivity increases quickly at laser energy density threshold which decreases when the hydrogen in a-Si:H films is removed by pre-annealing. During crystallization process, oxygen atoms from the air ambient have been introduced into the films and such an introducing process is hindered by the hydrogen eruption. When the oxygen content is high enough, the carrier-transport mechanism includes thermionic emission (TE) and thermionic field emission (TFE) in the vicinity of room temperature, which is similar to semi-insulating polycrystalline silicon (SIPOS).

  4. Excimer laser surface modification: Process and properties

    SciTech Connect

    Jervis, T.R.; Nastasi, M.; Hirvonen, J.P.

    1992-12-01

    Surface modification can improve materials for structural, tribological, and corrosion applications. Excimer laser light has been shown to provide a rapid means of modifying surfaces through heat treating, surface zone refining, and mixing. Laser pulses at modest power levels can easily melt the surfaces of many materials. Mixing within the molten layer or with the gas ambient may occur, if thermodynamically allowed, followed by rapid solidification. The high temperatures allow the system to overcome kinetic barriers found in some ion mixing experiments. Alternatively, surface zone refinement may result from repeated melting-solidification cycles. Ultraviolet laser light couples energy efficiently to the surface of metallic and ceramic materials. The nature of the modification that follows depends on the properties of the surface and substrate materials. Alloying from both gas and predeposited layer sources has been observed in metals, semiconductors, and ceramics as has surface enrichment of Cr by zone refinement of stainless steel. Rapid solidification after melting often results in the formation of nonequilibrium phases, including amorphous materials. Improved surface properties, including tribology and corrosion resistance, are observed in these materials.

  5. Excimer laser: a module of the alopecia areata common protocol.

    PubMed

    McMichael, Amy J

    2013-12-01

    Alopecia areata (AA) is an autoimmune condition characterized by T cell-mediated attack of the hair follicle. The inciting antigenic stimulus is unknown. A dense perbulbar lymphocytic infiltrate and reproducible immunologic abnormalities are hallmark features of the condition. The cellular infiltrate primarily consists of activated T lymphocytes and antigen-presenting Langerhans cells. The xenon chloride excimer laser emits its total energy at the wavelength of 308 nm and therefore is regarded as a "super-narrowband" UVB light source. Excimer laser treatment is highly effective in psoriasis, another T cell-mediated disorder that shares many immunologic features with AA. The excimer laser is superior in inducing T cell apoptosis in vitro compared with narrowband UVB, with paralleled improved clinical efficacy. The excimer laser has been used successfully in patients with AA. In this context, evaluation of the potential benefit of 308-nm excimer laser therapy in the treatment of AA is clinically warranted. Herein, the use of a common treatment protocol with a specifically designed module to study the outcome of excimer laser treatment on moderate-to-severe scalp AA in adults is described.

  6. Experimental study of 248nm excimer laser etching of alumina

    NASA Astrophysics Data System (ADS)

    Hu, Hongtao; Shao, Jingzhen; Wang, Xi; Fang, Xiaodong

    2016-10-01

    The 248 nm excimer laser etching characteristic of alumina ceramic and sapphire had been studied using different laser fluence and different number of pulses. And the interaction mechanism of 248 nm excimer laser with alumina ceramic and sapphire had been analyzed. The results showed that when the laser fluence was less than 8 J/cm2, the etching depth of alumina ceramic and sapphire were increased with the increase of laser fluence and number of pulses. At the high number pulses and high-energy, the surface of the sapphire had no obvious melting phenomenon, and the alumina ceramic appeared obvious melting phenomenon. The interaction mechanism of excimer laser with alumina ceramics and sapphire was mainly two-photon absorption. But because of the existence of impurities and defects, the coupling between the laser radiation and ceramic and sapphire was strong, and the thermal evaporation mechanism was also obvious.

  7. The Photochemistry of Cyano and Dicyanoacetylene at 193 nm.

    DTIC Science & Technology

    1987-07-28

    Halpern, L. Petway , R. Lu, W.M. Jackson, and V.R. McCrary and W. Nottingham Prepared for submission to the Journal of Chemical Physics Department of...CYANO- AND DICYANOACETYLENE AT 193 NM By J. B. Halpern% L. Petway , R. Lu W. M. Jackson , and V. R. McCrary Department of Chemistry Howard University

  8. Calcified lesion modeling for excimer laser ablation

    NASA Astrophysics Data System (ADS)

    Scott, Holly A.; Archuleta, Andrew; Splinter, Robert

    2009-06-01

    Objective: Develop a representative calcium target model to evaluate penetration of calcified plaque lesions during atherectomy procedures using 308 nm Excimer laser ablation. Materials and Methods: An in-vitro model representing human calcified plaque was analyzed using Plaster-of-Paris and cement based composite materials as well as a fibrinogen model. The materials were tested for mechanical consistency. The most likely candidate(s) resulting from initial mechanical and chemical screening was submitted for ablation testing. The penetration rate of specific multi-fiber catheter designs and a single fiber probe was obtained and compared to that in human cadaver calcified plaque. The effects of lasing parameters and catheter tip design on penetration speed in a representative calcified model were verified against the results in human cadaver specimens. Results: In Plaster of Paris, the best penetration was obtained using the single fiber tip configuration operating at 100 Fluence, 120 Hz. Calcified human lesions are twice as hard, twice as elastic as and much more complex than Plaster of Paris. Penetration of human calcified specimens was highly inconsistent and varied significantly from specimen to specimen and within individual specimens. Conclusions: Although Plaster of Paris demonstrated predictable increases in penetration with higher energy density and repetition rate, it can not be considered a totally representative laser ablation model for calcified lesions. This is in part due to the more heterogeneous nature and higher density composition of cadaver intravascular human calcified occlusions. Further testing will require a more representative model of human calcified lesions.

  9. Analysis of excimer laser radiant exposure effect toward corneal ablation volume at LASIK procedure

    NASA Astrophysics Data System (ADS)

    Adiati, Rima Fitria; Rini Rizki, Artha Bona; Kusumawardhani, Apriani; Setijono, Heru; Rahmadiansah, Andi

    2016-11-01

    LASIK (Laser Asissted In Situ Interlamelar Keratomilieusis) is a technique for correcting refractive disorders of the eye such as myopia and astigmatism using an excimer laser. This procedure use photoablation technique to decompose corneal tissues. Although preferred due to its efficiency, permanency, and accuracy, the inappropriate amount radiant exposure often cause side effects like under-over correction, irregular astigmatism and problems on surrounding tissues. In this study, the radiant exposure effect toward corneal ablation volume has been modelled through several processes. Data collecting results is laser data specifications with 193 nm wavelength, beam diameter of 0.065 - 0.65 cm, and fluence of 160 mJ/cm2. For the medical data, the myopia-astigmatism value, cornea size, corneal ablation thickness, and flap data are taken. The first modelling step is determining the laser diameter between 0.065 - 0.65 cm with 0.45 cm increment. The energy, power, and intensity of laser determined from laser beam area. Number of pulse and total energy is calculated before the radiant exposure of laser is obtained. Next is to determine the parameters influence the ablation volume. Regression method used to create the equation, and then the spot size is substituted to the model. The validation used is statistic correlation method to both experimental data and theory. By the model created, it is expected that any potential complications can be prevented during LASIK procedures. The recommendations can give the users clearer picture to determine the appropriate amount of radiant exposure with the corneal ablation volume necessary.

  10. Three years of clinical experiences on excimer laser angioplasty

    NASA Astrophysics Data System (ADS)

    Viligiardi, Riccardo; Galiberti, Sandra; Pini, Roberto; Salimbeni, Renzo

    1992-08-01

    Our experience on excimer laser angioplasty in peripheral arteries is reported. During three years 34 patients were treated with improved techniques, following the evolution of the laser and of the delivery systems. Encouraging results in the laser stand alone technique allowed us to reduce the association with balloon dilatation to a limited number of cases.

  11. Pre-bonding technology based on excimer laser surface treatment

    NASA Astrophysics Data System (ADS)

    Rotel, M.; Zahavi, J.; Tamir, S.; Buchman, A.; Dodiuk, H.

    2000-02-01

    The application of ArF excimer laser for surface pre-treatment of polycarbonate, polyetherimide, polyaryl ether-ether-ketone (PEEK) composite, fiberglass, aluminum, copper and fused silica was investigated. Various substrates were tested with excimer laser irradiation using various parameters, such as: intensity, repetition rate, and number of pulses. The optimal laser treatment parameters were found for each material needed for achieving maximum adhesional strength of the corresponding bonded joints. Experimental results indicated that UV laser surface treatment improved significantly the adhesion strength compared to conventional treated substrates for all the materials tested. The improved adhesion was correlated with the roughening of the irradiated surface, chemical modification and removal of contamination.

  12. Fabrication of micro-lenses using excimer laser ablation by means of laser-generated grey-tone-masks

    NASA Astrophysics Data System (ADS)

    Klotzbuecher, T.; Dadic, D.

    2010-02-01

    Micro-lenses, including Fresnel-Lenses, were fabricated by excimer laser ablation of polymers by means of lasergenerated grey-tone-masks. The smallest reproducible holes that could be fabricated by excimer laser ablation (193 nm, 1 J/cm2) of chromium-on-quartz (thickness 50-100 nm) were around 3 μm, the pitch of which should be at least at the same value to ensure a reproducibility of hole-arrays. To achieve acceptable ablation times during the fabrication of the grey-tone-masks, on-the-fly ablation instead of step-and-repeat technique was used, operating the laser at a constant pulse repetition rate <30 Hz with a continuously moving quartz-substrate. In this way and using different encoding techniques it was possible to generate at least 11 different grey-tones. The available grey-tones were used to generate grey-tone-masks for ablation of Polymethylmethacrylate (PMMA) and Polycarbonate (PC). For that, fluences in the range of 0.07-0.14 J/cm2 could be applied, corresponding to a value of 1.25 J/cm2 on the workpiece without grey-tonemask and a value lying well below the damage threshold of the chromium mask. Refractive micro-lenses fabricated in this way did not show a good imaging quality, since 11 grey-tones is less than required to generate a continuous surface profile over the full diameter of the lens during ablation and the achievable aspect ratio is limited with the small fluences. However, flat diffractive micro-lenses of the Fresenel type with a quasi-continuously surface profile could be fabricated in a sufficient manner. This can be attributed to the fact that each segment of the Fresenel-lenses can be encoded by 11 grey-tones, leading to much smoother surface reliefs and to a sufficient imaging quality.

  13. Chemical-free cleaning using excimer lasers

    NASA Astrophysics Data System (ADS)

    Lizotte, Todd E.; O'Keeffe, Terence R.

    1996-04-01

    A critical requirement in many industrial processes is the cleaning of oils and grease, oxides, solvent residues, particles, thin films and other contaminants from surfaces. There is a particularly acute need in the electronics industry for cleaning semiconductor wafers and computer chips and in the metals industry for removing oxides and other contaminants. Cleaning traditionally is done by various wet chemical processes, almost all consuming large amounts of water and producing large amounts of hazardous wastes. To further complicate this, some of these cleaning agents and vast water consumption are undergoing stringent restrictions. The Radiance ProcessSM is a novel, patented Excimer Laser approach to dry surface cleaning. The process has removed particles from 80 microns to submicron sizes, paints, inks, oxides, fingerprints, hazes, parts of molecules and metallic ions in fingerprints. The process does not ablate, melt or damage the underlying surface. Micro-roughening on some Silicon and Gallium Arsenide is on the order of 1A or less. This paper will discuss the various applications with this process and the latest results from a beta wafer cleaning prototype test bed system that is being built under an EPA grant and joint partnership between Radiance Services Company, Neuman Micro Technologies, Inc. and the Microelectronics Research Laboratory.

  14. Determination of flue gas alkali concentrations in fluidized-bed coal combustion by excimer-laser-induced fragmentation fluorescence

    SciTech Connect

    Hartinger, K.T.; Monkhouse, P.B.; Wolfrum, J.; Baumann, H.; Bonn, B.

    1994-12-31

    Gas-phase sodium concentrations were measured for the first time in situ in the flue gas of a fluidized-bed reactor by the excimer-laser-induced fragmentation fluorescence (ELIF) technique. This method involves using ArF-excimer laser light at 193 nm to simultaneously photodissociate the alkali compounds of interest and excite electronically the alkali atoms formed. The resulting fluorescence from Na (3{sup 2}P) atoms can he readily detected at 589 nm. Measured signals were converted to absolute concentrations using a calibration system that monitors alkali compounds under known conditions of temperature, pressure, and composition and rising the same optical setup as at the reactor. Several different coals were investigated under a specific set of reactor conditions at total pressures close to 1 bar. Sodium concentrations ranging from the sub-ppb region to 20 ppb were obtained, and a detection limit for sodium of 0.1 ppb under the present conditions was estimated. Over the course of the reactor program, contrasting concentration histories were observed for the two lignites and the hard coal investigated. In particular, significantly higher sodium concentrations were found for the hard coal, consistent with both the higher chlorine and sodium contents determined in the corresponding coal analysis.

  15. The influence of ArF excimer laser micromachining on physicochemical properties of bioresorbable poly(L-lactide)

    NASA Astrophysics Data System (ADS)

    Stepak, Bogusz D.; Antończak, Arkadiusz J.; Szustakiewicz, Konrad; Pezowicz, Celina; Abramski, Krzysztof M.

    2016-03-01

    The main advantage of laser processing is a non-contact character of material removal and high precision attainable thanks to low laser beam dimensions. This technique enables forming a complex, submillimeter geometrical shapes such as vascular stents which cannot be manufactured using traditional techniques e.g. injection moulding or mechanical treatment. In the domain of nanosecond laser sources, an ArF excimer laser appears as a good candidate for laser micromachining of bioresorbable polymers such as poly(L-lactide). Due to long pulse duration, however, there is a risk of heat diffusion and accumulation in the material. In addition, due to short wavelength (193 nm) photochemical process can modify the chemical composition of ablated surfaces. The motivation for this research was to evaluate the influence of laser micromachining on physicochemical properties of poly(L-lactide). We performed calorimetric analysis of laser machined samples by using differential scanning calorimetry (DSC). It allowed us to find the optimal process parameters for heat affected zone (HAZ) reduction. The chemical composition of the ablated surface was investigated by FTIR in attenuated total reflectance (ATR) mode.

  16. Predictive factors of restenosis following excimer laser coronary angioplasty

    NASA Astrophysics Data System (ADS)

    Geschwind, Herbert J.; Kvasnicka, Jan; Duport, George; Escojido, Henri; Lablanche, Jean M.

    1993-06-01

    Excimer laser coronary angioplasty has been shown to result in high acute success rate. However, long term follow up has shown significant restenosis. To evaluate the restenosis predictive factors, we analyzed data from patients treated by excimer laser angioplasty in four French clinical centers. A cohort of 166 patients, 140 men and 26 women with mean age of 58 +/- 11 years, was enrolled in the study. Total occlusions, tubular, ostial and calcified lesions, unsuccessful balloon dilatation and/or restenosis were considered as indications for laser angioplasty. Follow-up angiography six months after the procedure was achieved in 80 patients. In conclusion, excimer laser angioplasty is associated with a high initial success rate and an acceptable major complications rate. However the use of this method is limited by significant restenosis rate.

  17. Overview on the high power excimer laser technology

    NASA Astrophysics Data System (ADS)

    Liu, Jingru

    2013-05-01

    High power excimer laser has essential applications in the fields of high energy density physics, inertial fusion energy and industry owing to its advantages such as short wavelength, high gain, wide bandwidth, energy scalable and repetition operating ability. This overview is aimed at an introduction and evaluation of enormous endeavor of the international high power excimer laser community in the last 30 years. The main technologies of high power excimer laser are reviewed, which include the pumping source technology, angular multiplexing and pulse compressing, beam-smoothing and homogenous irradiation, high efficiency and repetitive operation et al. A high power XeCl laser system developed in NINT of China is described in detail.

  18. Excimer laser annealing for fabrication of low-cost solar cells

    NASA Technical Reports Server (NTRS)

    Greenwald, A. C.

    1984-01-01

    The goal was to determine if a pulsed excimer laser annealing (PELA) is cost effective compared to a baseline process. An excimer laser pulsed annealing apparatus was built. Three hundred solar cells were fabricated. An economic analysis was performed.

  19. High-power gas-discharge excimer ArF, KrCl, KrF and XeCl lasers utilising two-component gas mixtures without a buffer gas

    SciTech Connect

    Razhev, A M; Kargapol'tsev, E S; Churkin, D S

    2016-03-31

    Results of an experimental study of the influence of a gas mixture (laser active medium) composition on an output energy and total efficiency of gas-discharge excimer lasers on ArF* (193 nm), KrCl* (222 nm), KrF* (248 nm) and XeCl* (308 nm) molecules operating without a buffer gas are presented. The optimal ratios of gas components (from the viewpoint of a maximum output energy) of an active medium are found, which provide an efficient operation of laser sources. It is experimentally confirmed that for gas-discharge excimer lasers on halogenides of inert gases the presence of a buffer gas in an active medium is not a necessary condition for efficient operation. For the first time, in two-component gas mixtures of repetitively pulsed gas-discharge excimer lasers on electron transitions of excimer molecules ArF*, KrCl*, KrF* and XeCl*, the pulsed energy of laser radiation obtained under pumping by a transverse volume electric discharge in a low-pressure gas mixture without a buffer gas reached up to 170 mJ and a high pulsed output power (of up to 24 MW) was obtained at a FWHM duration of the KrF-laser pulse of 7 ns. The maximal total efficiency obtained in the experiment with two-component gas mixtures of KrF and XeCl lasers was 0.8%. (lasers)

  20. Comparative shock wave analysis during corneal ablation with an excimer laser, picosecond laser, and femtosecond laser

    NASA Astrophysics Data System (ADS)

    Krueger, Ronald R.; Juhasz, Tibor

    1995-05-01

    With the event of topographic steep central islands following excimer laser surgery and the potential damage to the corneal endothelium, shock waves are playing an increasingly important role in laser refractive surgery. With this in mind, we performed a comparative shock wave analysis in corneal tissue using an excimer laser, picosecond laser, and femtosecond laser. We used a Lambda Physik excimer laser at 308 nm wavelength, a Nd:YLF picosecond laser at 1053 nm wavelength and a synchronously pumped linear cavity femtosecond laser at 630 nm wavelength. The pulse widths of the corresponding lasers were 8 ns, 18 ps, 150 fs, respectively. The energy density of irradiation was 2.5 to 8 times the threshold level being 2 J/cm2 (excimer laser), 86 J/cm2 (picosecond laser) and 10.3 J/cm2 (femtosecond laser). Shock wave dynamics were analyzed using time-resolved photography on a nanosecond time scale using the picosecond laser in corneal tissue, water and air. Shock wave dynamics using the femtosecond laser were studied in water only while the excimer laser induced shock wave during corneal ablation was studied in air only. We found the dynamics of shock waves to be similar in water and corneal tissue indicating that water is a good model to investigate shock wave effects in the cornea. The magnitude of the shock wave velocity and pressure decays over time to that of a sound wave. The distance over which it decays is 3 mm in air with the excimer laser and 600 - 700 micrometers in air with the picosecond laser. In water, the picosecond laser shock wave decays over a distance of 150 micrometers compared to the femtosecond laser shock wave which decays over a distance of 30 micrometers . Overall the excimer laser shock wave propagates 5 times further than that of the picosecond laser and the picosecond laser shock wave propagates 5 times further than that of the femtosecond laser. In this preliminary comparison, the time and distance for shock wave decay appears to be directly

  1. Excimer laser interaction with dentin of the human tooth

    NASA Technical Reports Server (NTRS)

    Hammond, Ernest C., Jr.; Gilliam, Ruth L.; Baker, George R.

    1989-01-01

    The use an excimer laser produced many unusual conical structures within the dentin of the inner part of the human tooth. By varying the frequency of the laser one can disperse the energy and cause more bleeding in laser surgery, but not destroy the cells associated with the incision. Therefore, the healing process will virtually be without scarring. Whereas, using the infrared laser the blood loss would be less, but the healing process would tend to be longer because cells are being destroyed due to the cauterization effect of the laser. The question is, are these structures produced as an interaction with the laser or are they an intrinsic part of the structure. The effects of the laser interaction upon dentin was studied, and in using electron microscopy the interaction of the excimer laser upon the tooth dentin and other various biological tissue is more clearly understood.

  2. Batch patterning micro circuits and sensors with excimer laser machine

    NASA Astrophysics Data System (ADS)

    Yang, Ren; Pyka, Ralph; Kramer, Dennis; Mata, John; Souter, Matt; Thompson, Steven

    2008-02-01

    This paper will present the direct photo patterning of micro circuits and sensors with a XeCl excimer laser photo ablation system. The working principle and the ablation equipment for photo ablation of conductive thin film on polymer are described. Both large sheets and reel-to-reel webs can be ablated on this excimer laser photo ablation system. The ablation strategies and alignment strategies for the micro circuits and sensors are introduced. The test results show ablation results with high resolution, high throughput, high yield and cost-efficiency. This clearly shows that excimer laser photo ablation of the conductive materials on polymer substrates is a good choice for industrial mass product fabrication of low priced, disposable micro circuit and sensor devices.

  3. Pulsed excimer laser angioplasty of human cadaveric arteries.

    PubMed

    Farrell, E M; Higginson, L A; Nip, W S; Walley, V M; Keon, W J

    1986-02-01

    Laser angioplasty has been limited by the lack of precise control of thermal and acoustic vascular injury. Pulsed excimer lasers, by contrast, have a capacity to affect target tissue without heat dispersion or damage to surrounding structures. The ablative properties of three excimer wavelengths, krypton fluoride (249 nm), xenon chloride (308 nm), and xenon fluoride (351 nm), were investigated with the use of fresh human cadaveric normal and atherosclerotic femoral arteries. Light and electron microscopy demonstrated clean cuts with histologically normal edges. There was no evidence of either thermal or acoustic damage with any of the wavelengths studied. The depth of ablation varied directly with the number of pulses and inversely with tissue density while the incision width remained constant. The excimer laser appears to offer significant advantages over its conventional counterparts for the ablation of atherosclerotic plaque.

  4. High-power gas-discharge excimer ArF, KrCl, KrF and XeCl lasers utilising two-component gas mixtures without a buffer gas

    NASA Astrophysics Data System (ADS)

    Razhev, A. M.; Kargapol'tsev, E. S.; Churkin, D. S.

    2016-03-01

    Results of an experimental study of the influence of a gas mixture (laser active medium) composition on an output energy and total efficiency of gas-discharge excimer lasers on ArF* (193 nm), KrCl* (222 nm), KrF* (248 nm) and XeCl* (308 nm) molecules operating without a buffer gas are presented. The optimal ratios of gas components (from the viewpoint of a maximum output energy) of an active medium are found, which provide an efficient operation of laser sources. It is experimentally confirmed that for gas-discharge excimer lasers on halogenides of inert gases the presence of a buffer gas in an active medium is not a necessary condition for efficient operation. For the first time, in two-component gas mixtures of repetitively pulsed gas-discharge excimer lasers on electron transitions of excimer molecules ArF*, KrCl*, KrF* and XeCl*, the pulsed energy of laser radiation obtained under pumping by a transverse volume electric discharge in a low-pressure gas mixture without a buffer gas reached up to 170 mJ and a high pulsed output power (of up to 24 MW) was obtained at a FWHM duration of the KrF-laser pulse of 7 ns. The maximal total efficiency obtained in the experiment with two-component gas mixtures of KrF and XeCl lasers was 0.8%.

  5. Pulsed excimer laser processing for cost-effective solar cells

    NASA Technical Reports Server (NTRS)

    Wong, David C.

    1985-01-01

    The application of excimer laser in the fabrication of photovoltaic devices was investigated extensively. Processes included junction formation, laser assisted chemical vapor deposition metallization, and laser assisted chemical vapor deposition surface passivation. Results demonstrated that implementation of junction formation by laser annealing in production is feasible because of excellent control in junction depth and quality. Both metallization and surface passivation, however, were found impractical to be considered for manufacturing at this stage.

  6. Analytical Characterization of CFRP Laser Treated by Excimer Laser Radiation

    NASA Astrophysics Data System (ADS)

    Kreling, S.; Fischer, F.; Delmdahl, R.; Gäbler, F.; Dilger, K.

    Due to the increasing interest in lightweight structures, carbon-fiber reinforced plastics are increasingly applied, especially in the transportation industry. An interesting technology for joining these materials is adhesive bonding due to numerous advantages compared to conventional techniques like riveting. However, to achieve a strong and durable bond, surface pre-treatment is necessary to remove residues of release agents that are transferred to the surface during manufacturing. This paper describes analytical experiments, namely SEM and XPS, performed on CFRP surfaces pre-treated with 308 nm excimer laser radiation.

  7. Excimer laser induced plasma for aluminum alloys surface carburizing

    NASA Astrophysics Data System (ADS)

    Fariaut, F.; Boulmer-Leborgne, C.; Le Menn, E.; Sauvage, T.; Andreazza-Vignolle, C.; Andreazza, P.; Langlade, C.

    2002-01-01

    Currently, while light alloys are useful for automotive industries, their weak wear behavior is a limiting factor. The excimer laser carburizing process reported here has been developed to enhance the mechanical and chemical properties of aluminum alloys. An excimer laser beam is focused onto the alloy surface in a cell containing 1 bar methane or/and propylene gas. A vapor plasma expands from the surface, the induced shock wave dissociates and ionizes the ambient gas. Carbon atoms diffuse into the plasma in contact with the irradiated surface. An aluminum carbide layer is created by carbon diffusion in the surface liquid layer during the recombination phase of the plasma.

  8. An AC phase measuring interferometer for measuring dn/dT of fused silica and calcium fluoride at 193 nm

    SciTech Connect

    Shagam, R.N.

    1998-09-01

    A novel method for the measurement of the change in index of refraction vs. temperature (dn/dT) of fused silica and calcium fluoride at the 193 nm wavelength has been developed in support of thermal modeling efforts for the development of 193 nm-based photolithographic exposure tools. The method, based upon grating lateral shear interferometry, uses a transmissive linear grating to divide a 193 nm laser beam into several beam paths by diffraction which propagate through separate identical material samples. One diffracted order passing through one sample overlaps the undiffracted beam from a second sample and forms interference fringes dependent upon the optical path difference between the two samples. Optical phase delay due to an index change from heating one of the samples causes the interference fringes to change sinusoidally with phase. The interferometer also makes use of AC phase measurement techniques through lateral translation of the grating. Results for several samples of fused silica and calcium fluoride are demonstrated.

  9. Excimer laser coronary angioplasty: clinical results and future directions

    NASA Astrophysics Data System (ADS)

    Bittl, John A.

    1993-06-01

    Despite four years of intensive clinical investigation, excimer laser coronary angioplasty has not been accepted by the interventional cardiology community as the intervention of choice for any lesion type. Although the preliminary analysis presented here shows that the new technology shows promise for the treatment of saphenous vein graft lesions, aorto-ostial lesions and other lesions, these lesion types account for only about 5 - 10% of cases currently targeted for angioplasty and can frequently be treated with other interventional methods. Broader use of excimer laser angioplasty requires convincing proof that the new technology has clear superiority over other interventional techniques for a wider range of lesion types. Furthermore, the mechanisms of vessel dissection, perforation and abrupt closure need further clarification. Thus, the major challenges for excimer laser angioplasty include: (1) randomized trials to document the superiority of excimer laser over balloon angioplasty; (2) improved catheter designs, including devices for eccentric lesions and total occlusions; and (3) a better understanding of laser-tissue interactions to reduce the unpredictability of unfavorable angiographic outcome.

  10. Gain and Lasing in Nuclear Excited Excimer Laser Systems.

    DTIC Science & Technology

    1981-04-24

    sources. The most advantageous volumetric nuclear excitation source is UF If enriched UF could be used as a pump source, a self- critical NPL could be...3 lower laser state by nuclear excitation and gas heating or by quenching of the upper laser state by UF6 and other species. Most NPLs demonstrated...induced effects, the loss in power density may be more critical than any nuclear considerations.I * Direct nuclear pumping of XeF excimer lasers has been

  11. High index fluoride materials for 193nm immersion lithography

    NASA Astrophysics Data System (ADS)

    Nawata, T.; Inui, Y.; Masada, I.; Nishijima, E.; Satoh, H.; Fukuda, T.

    2006-03-01

    We tried to investigate various kinds of metal fluoride materials which have higher gravity than CaF II and cubic crystal system, and we found out barium lithium fluoride (BaLiF 3) and potassium yttrium fluoride (KY 3F 10) as candidates for the last lens material. We have developed unique Czochralski (CZ) machines and techniques for the growth of large calcium fluoride single crystals. And we applied these technologies to the growth of fluoride high index materials. We have succeeded to grow the large BaLiF 3 single crystal with 120mm in diameter and a KY 3F 10 single crystal, and measured their basic properties such as refractive index, VUV transmittance, birefringence, and so on. As a result of our basic research, we found out that BaLiF 3 single crystal is transparent at VUV region, and the refractive index at 193nm is 1.64, and KY 3F 10 single crystal has the index of 1.59 at the wavelength of 193nm which is slightly higher than fused silica. We expect that these fluoride high index materials are useful for the last lens material of the next generation immersion lithography.

  12. Excimer laser fragmentation fluorescence spectroscopy for real-time monitoring of combustion generated pollutants

    NASA Astrophysics Data System (ADS)

    Damm, Christopher John

    Toxic pollutant emissions from combustion pose a hazard to public and environmental health. Better diagnostic techniques would benefit emissions monitoring programs and aid research aimed at understanding toxic pollutant formation and behavior. Excimer Laser Fragmentation Fluorescence Spectroscopy (ELFFS) provides sensitive, real-time, in situ measurements of several important combustion related pollutants. This thesis demonstrates the capabilities of ELFFS for detecting amines in combustion exhausts and carbonaceous particulate matter from engines. ELFFS photofragments target species using a 193 nm excimer laser to form fluorescent signature species. The NH (A--X) band at 336 nm is used to monitor ammonia, ammonium nitrate and ammonium sulfate. There are no major interferences in this spectral region. The sensitivity is approximately 100 ppb (1 second measurement) for ammonia in post flame gases and 100 ppb (mole fraction) for ammonium nitrate/sulfate in ambient air. Quenching of NH by the major combustion products does not limit the applicability of the detection method. Fluorescence from excited carbon atoms at 248 nm (1P 0 → 1S0) following photofragmentation measures particulate matter in a two-stroke gasoline engine and a four-stroke diesel engine. Fluorescence from CH (A2Delta → X 2pi, 431 nm) C2 (d3pig → a3piu, 468 nm) fragments is also observed. The atomic carbon fluorescence signal is proportional to the mass concentration of particles in the laser interrogation region. The 100-shot (1 second) detection limit for particles in the two-stroke gasoline engine exhaust is 0.5 ppb (volume fraction). The 100-shot detection limit for four-stroke diesel particulate matter is 0.2 ppb. Interferences from carbon monoxide and carbon dioxide are negligible. The ratios of atomic carbon, C2, and CH peaks provide information on the molecular forms of compounds condensed on or contained within the particles measured. The C/C2 signal ratio can be used to distinguish

  13. Periodically pulsed excimer master oscillator-regenerative amplifier laser set

    NASA Astrophysics Data System (ADS)

    Ageyev, V. P.; Atezhev, V. V.; Bukreyev, V. S.; Vartapetov, S. K.; Zhukov, A. I.; Konov, V. I.; Savelyev, A. D.

    1987-06-01

    A periodically pulsed excimer laser set consisting of a master oscillator and a regenerative amplifier is proposed for improvement of laser beam characteristics, particularly decreasing divergence in the case of short pumping pulses and attendant high gain. Each active medium is pumped by electric discharge, both discharge circuits using magnetic switches with a common commutator so that the laser energy characteristics and the time separation between gain buildup in the two lasers can be simultaneously optimized. An experimental set was built with a Model 170 excimer laser as amplifier and a compact excimer laser as oscillator. Tests were performed with F2 + Kr + He mixtures lasing at lambda = 248, with and without injection. Emission pulses were produced at a repetition rate of 20 Hz and the beam divergence was measured through a lens with a focal length of 300 cm. The oscillator beam with a divergence of 600 microrad carried an energy of 700 microJ per pulse and was amplified to 35 mJ. The divergence of the amplified beam in the direction parallel to that of the discharge current was 140 microrad without injection and 80 microrad with injection. Divergence in the perpendicular direction was 90 microrad without and with injection.

  14. Impacts of excimer laser annealing on Ge epilayer on Si

    NASA Astrophysics Data System (ADS)

    Huang, Zhiwei; Mao, Yichen; Yi, Xiaohui; Lin, Guangyang; Li, Cheng; Chen, Songyan; Huang, Wei; Wang, Jianyuan

    2017-02-01

    The impacts of excimer laser annealing on the crystallinity of Ge epilayers on Si substrate grown by low- and high-temperature two-step approach in an ultra-high vacuum chemical vapor deposition system were investigated. The samples were treated by excimer laser annealing (ELA) at various laser power densities with the temperature above the melting point of Ge, while below that of Si, resulting in effective reduction of point defects and dislocations in the Ge layer with smooth surface. The full-width at half-maximum (FWHM) of X-ray diffraction patterns of the low-temperature Ge epilayer decreases with the increase in laser power density, indicating the crystalline improvement and negligible effect of Ge-Si intermixing during ELA processes. The short laser pulse time and large cooling rate cause quick melting and recrystallization of Ge epilayer on Si in the non-thermal equilibrium process, rendering tensile strain in Ge epilayer as calculated quantitatively with thermal mismatch between Si and Ge. The FWHM of X-ray diffraction patterns is significantly reduced for the two-step grown samples after treated by a combination of ELA and conventional furnace thermal annealing, indicating that the crystalline of Ge epilayer is improved more effectively with pre- annealing by excimer laser.

  15. New single-layer positive photoresists for 193-nm photolithography

    NASA Astrophysics Data System (ADS)

    Okoroanyanwu, Uzodinma; Shimokawa, Tsutomu; Byers, Jeff D.; Medeiros, David R.; Willson, C. Grant; Niu, Qingshang J.; Frechet, Jean M. J.; Allen, Robert D.

    1997-07-01

    New series of chemically amplified, single layer, positive tone photoresists for 193 nm lithography have been developed. These resists were formulated from a series of cycloaliphatic co- and terpolymers of 2-methyl propyl bicyclo(2.2.1)hept-2- ene-5-carboxylate (carbo-tert-butoxynorbornene), bicyclo(2.2.1)hept-2-ene carboxylic acid (norbornene carboxylic acid), 8-methyl-8-carboxy tetracyclo(4,4,0.12,5,17,10)dodec-3-ene (methyltetracyclododecene carboxylic acid), norbornenemethanol, and maleic anhydride, which were synthesized by free radical, vinyl addition and ring opening metathesis polymerization techniques. The polymers derived from ring opening metathesis polymerization have bee successfully hydrogenated to provide yet another member of this group of materials. The cycloaliphatic polymer backbones provide etch resistance, mechanical properties and stability to radiation. The lithographic function is provided by carefully tailored pendant groups, which include an acid functionality that is masked by protecting groups that undergo acid catalyzed thermolysis as well as polar groups that influence the adhesion, wetability and dissolution properties of the polymer. The polymers are soluble in common organic solvents and have glass transition temperatures ranging from less than 60 degrees Celsius to higher than 250 degrees Celsius depending on their specific structure and mode of polymerization. They are at least as transparent at 193 nm as the corresponding acrylics. Their dry etch resistance varies with the formulation, but the base polymers etch more slowly than novolac under conditions typically used to pattern polysilicon. Upon exposure and baking, the resists have demonstrated high sensitivities (9-25 mJ/cm2), and 0.16 micrometer features have bean resolved.

  16. Excimer laser coronary angioplasty: relative risk analysis of clinical results

    NASA Astrophysics Data System (ADS)

    Bittl, John A.

    1992-08-01

    Reports of successful use of excimer laser coronary angioplasty for complex coronary artery disease abound, yet firm indications for its use have not been defined. We attempted to treat 858 coronary stenoses in 764 consecutive patients (mean age 61 years; range 32 - 91 years; 75% men; 76% with Class III or IV angina) with excimer laser angioplasty at 308 nm. Successful treatment was achieved in 86% of patients, as indicated by excimer laser angioplasty, we used relative risk analysis. This showed that certain angiographic features, such as lesions at a vessel bifurcation (odds ratio, OR equals 0.46; 95% confidence interval 0.23, 0.88; P equals 0.017;) or in a tortuous segment (OR equals 0.54; 95% CI equals 0.34, 0.88; P equals 0.041), have decreased likelihood of clinical success. On the other hand, ostial stenoses (OR equals 1.06; 95% CI equals 0.44, 2.56, P equals 0.903) and saphenous vein graft lesions (OR equals 2.17; 95% CI equals 0.98, 4.82; P equals 0.051) have acceptable success rates. Diffuse disease (> 20 mm), total occlusions and calcified lesions were treated as successfully as all other lesion types. Successful treatment with excimer laser coronary angioplasty was also achieved in almost all patients (15/16) who had a prior unsuccessful attempt at balloon angioplasty in the lesion was crossed with a guidewire yet resists either balloon catheter passage or full dilatation. Follow-up angiography was obtained in 70% of eligible patients. Angiographic restenosis, defined by > 50% stenosis, was seen in 60% of patients. Relative risk analysis showed an increased risk of restenosis when adjunctive balloon angioplasty was not used (OR equals 1.68; 95% CI equals 1.02, 2.28; P equals 0.039). Other variables known to affect the outcome of balloon angioplasty, such as lesion length or stenosis in degenerated saphenous vein bypass graft, did not influence the

  17. Triggering Excimer Lasers by Photoionization from Corona Discharges

    NASA Astrophysics Data System (ADS)

    Xiong, Zhongmin; Duffey, Thomas; Brown, Daniel; Kushner, Mark

    2009-10-01

    High repetition rate ArF (192 nm) excimer lasers are used for photolithography sources in microelectronics fabrication. In highly attaching gas mixtures, preionization is critical to obtaining stable, reproducible glow discharges. Photoionization from a separate corona discharge is one technique for preionization which triggers the subsequent electron avalanche between the main electrodes. Photoionization triggering of an ArF excimer laser sustained in multi-atmosphere Ne/Ar/F2/Xe gas mixtures has been investigated using a 2-dimensional plasma hydrodynamics model including radiation transport. Continuity equations for charged and neutral species, and Poisson's equation are solved coincident with the electron temperature with transport coefficients obtained from solutions of Boltzmann's equation. Photoionizing radiation is produced by a surface discharge which propagates along a corona-bar located adjacent to the discharge electrodes. The consequences of pulse power waveform, corona bar location, capacitance and gas mixture on uniformity, symmetry and gain of the avalanche discharge will be discussed.

  18. Lactones in 193 nm resists: What do they do?

    NASA Astrophysics Data System (ADS)

    Ito, Hiroshi; Truong, Hoa D.; Brock, Phil J.

    2008-03-01

    Lactones are almost ubiquitously employed in 193 nm resists to increase the polarity of hydrophobic alicyclic polymers. What else do lactones do in 193 nm resists? We studied the behavior of methacrylate (MA) resists consisting of different protecting groups, hexafluoroalcohols, and norbornane lactone methacrylate (NLM, 2-oxo-3-oxatricyclo[4.2.1.04,8]nonan-5-yl methacrylate). When the protecting group is large [ethylcyclooctyl (ECO) and methyladamantyl (MAd)], thinning of the resist film that occurs in highly exposed areas upon postexposure bake (PEB) is significantly smaller than what is expected from the polymer composition. When the concentration of isopropylhexafluoroalcohol methacrylate (iPrHFAMA) is increased in the ECOMA-NLM polymer, the thinning increases and reaches 100% of theory and the ECOMA-norbornenehexafluoroalcohol methacrylate (NBHFAMA) resist loses quantitative thickness in highly-exposed areas upon PEB at 90 °C. This indicates that small lactones which are more basic than esters can trap deprotection fragments especially when the protecting group is large. Such entrapment was detected by IR spectroscopy and also observed at temperatures as high as 200 °C in thermogravimetric analysis (TGA). Incorporation of lactone appears to decrease the bake temperature sensitivity and the sensitivity of the resist perhaps due to trapping of photochemically generated acids by basic lactone. The lactone ring can be hydrolyzed during aqueous base development but does not seem to affect the dissolution rate, indicating that hydrolysis occurs in aqueous base solution after dissolution. Poly(methacrylic acid-NLM) dissolves as fast as poly(methacrylic acid) in 0.26 N tetramethylammonium hydroxide (TMAH) aqueous solution. While exposed P(ECOMA 47-NLM 53) resist dissolves in 0.26 N developer at about the same rate as authentically prepared poly(methacrylic acid 47-NLM 53), the dissolution rate of highly-exposed P(MAdMA 44-NLM 56) resist is much slower, indicating

  19. Investigation of electron beam stabilization of 193-nm photoresists

    NASA Astrophysics Data System (ADS)

    Kim, Myoung-Soo; Park, Jong-Woon; Kim, Hak-Joon; Jun, Bum-Jin; Gil, Myung-Goon; Kim, Bong-Ho; Ross, Matthew F.; Livesay, William R.

    2001-08-01

    193nm lithography is a promising candidate for the fabrication of microelectronic devices at the 130nm design rule and below. With smaller feature sizes, below 130nm, reduced resist thickness is essential because of the pattern collapse issues at high aspect ratios and the limited depth of focus with 193nm lithography tools. However, ArF resists have shown problems with etch selectivity, especially with the thin resist layers necessary. Additionally, pattern slimming during CD-SEM measurement, due to the nature of the resist chemistry, is an issue with feature stability after patterning. At present, many studies have been performed for improving the etch selectivity of resists and addressing line slimming issues. In this study, the electron beam stabilization process has been applied for improving the etch selectivity of resist patterns having an aspect ratio less than 3.0. The electron beam stabilization has been applied to two different ArF resist types; acrylate and cyclic-olefin- maleic-anhydride (COMA), which have been evaluated with respect to materials properties, etch selectivity, and line slimming performance as a function of electron beam dose and etch condition. Film shrinkage and the change in index of refraction were monitored as a function of stabilization condition. The chemical properties were characterized before and after electron beam stabilization using FTIR analysis. Blanket resist etch rate studies were performed as a function of stabilization condition for each resist type. Cross- sectional views of resist patterns after etch processing were also investigated to evaluate the improvement in etch resistance provided by the electron beam process. CD SEM measurements were performed to evaluate the impact of the stabilization process on the patterned features. The issue of line slimming has also been evaluated, with and without electron beam stabilization, for the different ArF resist materials considered. The results were compared with a Kr

  20. Nebulae at keratoconus--the result after excimer laser removal.

    PubMed

    Fagerholm, P; Fitzsimmons, T; Ohman, L; Orndahl, M

    1993-12-01

    Ten patients underwent excimer laser ablation due to nebula formation at keratoconus. The nebulae interfered significantly with contact lens fit or wearing time. The mean follow-up time in these patients was 16.5 months. Following surgery all patients could be successfully fitted with a contact lens and thereby obtain good visual acuity. Furthermore, contact lens wearing time was 8 hours or more in all cases. In 2 patients the nebulae recurred but were successfully retreated.

  1. Assessment of the Suitability of Excimer Lasers in Treating Onychomycosis

    NASA Astrophysics Data System (ADS)

    Kymplová, Jaroslava; Jelínek, Miroslav; Urzová, Jana; Mikšovský, Jan; Dušek, Karel; Bauerová, Lenka

    2014-04-01

    Since it is known that UV-C radiation kills fungus, we wanted to verify the hypothesis that the use of excimer laser could be an alternative method for treating onychomycosis - nail fungus. The aim of the first stage of this work was to determine the transmission, reflection and absorption of nails. In the following stage we focused on irradiation of fungi. Our final task is to assess whether it is possible to determine the parameters of radiation (a total dose,a dose per pulse frequency, a repetition rate, a number of pulses) for which the elimination of fungi would be the most effective but without damaging the nail and soft tissue underneath it. The results so far have showed that UV-C radiation does not pass through a fingernail to such an extent that it could damage the soft tissue beneath it. Fungi are destroyed by the application of only small doses of radiation using the excimer laser. Additional measurements will be required to determine the modulation parameters of the excimer laser radiation for the treatment of onychomycosis.

  2. Customized illumination shapes for 193nm immersion lithography

    NASA Astrophysics Data System (ADS)

    Ling, Moh Lung; Chua, Gek Soon; Lin, Qunying; Tay, Cho Jui; Quan, Chenggen

    2008-03-01

    In this paper, a study on customized illumination shape configurations as resolution enhancement for 45nm technology node will be presented. Several new source shape configurations will be explored through simulation based on 193nm immersion lithography on 6% Attenuated Phase Shift Mask. Forbidden pitch effect is commonly encountered in the application of off axis illumination (OAI). The illumination settings are often optimized to allow maximum process window for a pitch. This is done by creating symmetrical distribution of diffraction order on the pupil plane. However, at other pitch, the distribution of diffraction order on the pupil plane results in severe degradation in image contrast and results in significant critical dimension (CD) fluctuation. The problematic pitch is often known as forbidden pitch. It has to be avoided in the design and thus limited the pitch range to be imaged for particular illumination. An approach to modify off axis illumination to minimize the effect of forbidden pitch is explored in this study. The new customized shape for one dimensional line and space pattern is modified from current off axis illumination. Simulation study is done to evaluate the performance some customized shapes. The extent of CD fluctuation and CD through pitch uniformity is analyzed to determine the performance enhancement of the new illumination shapes. From simulation result, the proposed modification have significantly improved the through pitch performance and minimized the effect of forbidden pitch.

  3. EUV reticle inspection with a 193nm reticle inspector

    NASA Astrophysics Data System (ADS)

    Broadbent, William; Inderhees, Gregg; Yamamoto, Tetsuya; Lee, Isaac; Lim, Phillip

    2013-06-01

    The prevailing industry opinion is that EUV Lithography (EUVL) will enter High Volume Manufacturing (HVM) in the 2015 - 2017 timeframe at the 16nm HP node. Every year the industry assesses the key risk factors for introducing EUVL into HVM - blank and reticle defects are among the top items. To reduce EUV blank and reticle defect levels, high sensitivity inspection is needed. To address this EUV inspection need, KLA-Tencor first developed EUV blank inspection and EUV reticle inspection capability for their 193nm wavelength reticle inspection system - the Teron 610 Series (2010). This system has become the industry standard for 22nm / 3xhp optical reticle HVM along with 14nm / 2xhp optical pilot production; it is further widely used for EUV blank and reticle inspection in R and D. To prepare for the upcoming 10nm / 1xhp generation, KLA-Tencor has developed the Teron 630 Series reticle inspection system which includes many technical advances; these advances can be applied to both EUV and optical reticles. The advanced capabilities are described in this paper with application to EUV die-to-database and die-to-die inspection for currently available 14nm / 2xhp generation EUV reticles. As 10nm / 1xhp generation optical and EUV reticles become available later in 2013, the system will be tested to identify areas for further improvement with the goal to be ready for pilot lines in early 2015.

  4. Progress of excimer laser development in the AMMTRA project

    NASA Astrophysics Data System (ADS)

    Nagai, Haruhiko

    1993-05-01

    Since 1986, five kinds of excimer laser technologies have been studied by five companies as part of the large-scale project `Advanced Material-Processing and Machining System,' which is one of the national R&D projects in Japan. The five kinds of excimer lasers being developed are as follows: (1) high power XeCl laser with an average power of 2 kW, (2) high repetition rate XeCl laser with a repetition rate of 5 kHz, (3) automatically power-stabilized 400 W average power XeCl laser with a stability of +/- 1% or less, (4) long-life ArF laser with a gas life of 109 shots or more, and (5) high beam-quality ArF laser with an average power of 200 W. The project passed an interim evaluation at the end of fiscal 1990, and is now ongoing toward the achievement of final targets as of the end of fiscal 1993. The present status and future prospect of the technologies are reviewed.

  5. Automatic alignment of double optical paths in excimer laser amplifier

    NASA Astrophysics Data System (ADS)

    Wang, Dahui; Zhao, Xueqing; Hua, Hengqi; Zhang, Yongsheng; Hu, Yun; Yi, Aiping; Zhao, Jun

    2013-05-01

    A kind of beam automatic alignment method used for double paths amplification in the electron pumped excimer laser system is demonstrated. In this way, the beams from the amplifiers can be transferred along the designated direction and accordingly irradiate on the target with high stabilization and accuracy. However, owing to nonexistence of natural alignment references in excimer laser amplifiers, two cross-hairs structure is used to align the beams. Here, one crosshair put into the input beam is regarded as the near-field reference while the other put into output beam is regarded as the far-field reference. The two cross-hairs are transmitted onto Charge Coupled Devices (CCD) by image-relaying structures separately. The errors between intersection points of two cross-talk images and centroid coordinates of actual beam are recorded automatically and sent to closed loop feedback control mechanism. Negative feedback keeps running until preset accuracy is reached. On the basis of above-mentioned design, the alignment optical path is built and the software is compiled, whereafter the experiment of double paths automatic alignment in electron pumped excimer laser amplifier is carried through. Meanwhile, the related influencing factors and the alignment precision are analyzed. Experimental results indicate that the alignment system can achieve the aiming direction of automatic aligning beams in short time. The analysis shows that the accuracy of alignment system is 0.63μrad and the beam maximum restoration error is 13.75μm. Furthermore, the bigger distance between the two cross-hairs, the higher precision of the system is. Therefore, the automatic alignment system has been used in angular multiplexing excimer Main Oscillation Power Amplification (MOPA) system and can satisfy the requirement of beam alignment precision on the whole.

  6. Optical and Kinetic Processes in Excimer Lasers

    DTIC Science & Technology

    1993-03-01

    investigations of the spectroscopy and chemical kinetics of XeF and XeCl lasers using theoretical techniques , synchrotron radiation excitation, and laser... technique for characterizing potential SBS media. Our work is described in Appendices N and 0. 3 OTHER TOPICS IN LASERS AND NONLINEAR OPTICS The SRS and... technique described above for several fluorine and chlorine donors are shown in Table 1. The quanitities in parentheses indicate where the yields have

  7. Excimer laser ablation of the cornea

    NASA Astrophysics Data System (ADS)

    Pettit, George H.; Ediger, Marwood N.; Weiblinger, Richard P.

    1995-03-01

    Pulsed ultraviolet laser ablation is being extensively investigated clinically to reshape the optical surface of the eye and correct vision defects. Current knowledge of the laser/tissue interaction and the present state of the clinical evaluation are reviewed. In addition, the principal findings of internal Food and Drug Administration research are described in some detail, including a risk assessment of the laser-induced-fluorescence and measurement of the nonlinear optical properties of cornea during the intense UV irradiation. Finally, a survey is presented of the alternative laser technologies being explored for this ophthalmic application.

  8. Inline detection of Chrome degradation on binary 193nm photomasks

    NASA Astrophysics Data System (ADS)

    Dufaye, Félix; Sippel, Astrid; Wylie, Mark; García-Berríos, Edgardo; Crawford, Charles; Hess, Carl; Sartelli, Luca; Pogliani, Carlo; Miyashita, Hiroyuki; Gough, Stuart; Sundermann, Frank; Brochard, Christophe

    2013-09-01

    193nm binary photomasks are still used in the semiconductor industry for the lithography of some critical layers for the nodes 90nm and 65nm, with high volumes and over long periods. However, these 193nm binary photomasks can be impacted by a phenomenon of chrome oxidation leading to critical dimensions uniformity (CDU) degradation with a pronounced radial signature. If not detected early enough, this CDU degradation may cause defectivity issues and lower yield on wafers. Fortunately, a standard cleaning and repellicle service at the mask shop has been demonstrated as efficient to remove the grown materials and get the photomask CD back on target.Some detection methods have been already described in literature, such as wafer CD intrafield monitoring (ACLV), giving reliable results but also consuming additional SEM time with less precision than direct photomask measurement. In this paper, we propose another approach, by monitoring the CDU directly on the photomask, concurrently with defect inspection for regular requalification to production for wafer fabs. For this study, we focused on a Metal layer in a 90nm technology node. Wafers have been exposed with production conditions and then measured by SEM-CD. Afterwards, this photomask has been measured with a SEM-CD in mask shop and also inspected on a KLA-Tencor X5.2 inspection system, with pixels 125 and 90nm, to evaluate the Intensity based Critical Dimension Uniformity (iCDU) option. iCDU was firstly developed to provide feed-forward CDU maps for scanner intrafield corrections, from arrayed dense structures on memory photomasks. Due to layout complexity and differing feature types, CDU monitoring on logic photomasks used to pose unique challenges.The selection of suitable feature types for CDU monitoring on logic photomasks is no longer an issue, since the transmitted intensity map gives all the needed information, as shown in this paper. In this study, the photomask was heavily degraded after more than 18,000 300

  9. Development of fluoropolymer for 193nm immersion lithography

    NASA Astrophysics Data System (ADS)

    Shirota, Naoko; Takebe, Yoko; Sasaki, Takashi; Yokokoji, Osamu; Toriumi, Minoru; Masuhara, Hiroshi

    2006-03-01

    We had already developed several series of fluoropolymers, FPRs and FUGUs, having a partially fluorinated monocyclic structure and having acidic hydroxyl group, which acts as dissolution unit into alkaline solution. Then we have optimized these polymers for top-coat as the developer-soluble type in the 193nm immersion lithography. However the hydrophobicity of these polymers were a little poor due to its hydroxyl group. So we thought that the introduction of water repellent moiety into the these polymers structure is effective to improve the their hydrophobicity though the increase of water repellent unit in the polymer leads to lower dissolution rate in developer. To introduce as much as possible of hydrophobicity unit, we selected FUGU as platform, which has larger dissolution rate in developer than that of FPRs, We copolymerized FUGU with higher water-repellent component and obtained three copolymers, FUGU-CoA, FUGU-CoB, and FUGU-CoC. In this paper, we described characteristics and evaluation of these polymers. Most of these polymer showed an improvement of hydrophobicity, in particular FUGU-CoB had excellent hydrophobicity due to introduction bulky containing-fluorine group. In this study, we also investigated the interaction between the water and various polymers by using QCM method. The difference between FUGU and water repellent polymers for swelling behavior to water became clear by analysis of diffusion coefficient. We found that our new co-polymers have excellent diffusion coefficient than FUGU which was confirmed by QCM method used to evaluate water permeability and water diffusion in the materials.

  10. Research development of thermal aberration in 193nm lithography exposure system

    NASA Astrophysics Data System (ADS)

    Wang, Yueqiang; Liu, Yong

    2014-08-01

    Lithographic exposure is the key process in the manufacture of the integrated circuit, and the performance of exposure system decides the level of microelectronic manufacture technology. Nowadays, the 193nm ArF immersion exposure tool is widely used by the IC manufacturer. With the uniformity of critical dimension (CDU) and overlay become tighter and the requirement for throughput become higher, the thermal aberration caused by lens material and structure absorbing the laser energy cannot be neglected. In this paper, we introduce the efforts and methods that researcher on thermal aberration and its control. Further, these methods were compared to show their own pros and cons. Finally we investigated the challenges of thermal aberration control for state of the art technologies.

  11. Excimer laser surface ablation: a review of recent literature.

    PubMed

    O'Brart, David P S

    2014-01-01

    The aim was to review the recently published literature on excimer laser surface ablation procedures, including photorefractive keratectomy (PRK), laser sub-epithelial keratomileusis (LASEK), microkeratome-assisted PRK (epi-LASIK) and trans-epithelial (laser-assisted) PRK, to help elucidate where and how surface ablation may best fit into current refractive surgical practice. The emphasis was on publications within the last three years and included systemic reviews, meta-analyses and randomised controlled trials. Where such evidence did not exist, selective large series cohort studies, case-controlled studies and case series with follow-up preferably greater than six months were examined and included. Refractive and visual outcomes are excellent and comparable to those after LASIK even in complex cases after previous corneal surgery. Indeed, surface ablation combined with corneal collagen cross-linking may be used in selected eyes with biomechanical instability, where LASIK is contraindicated. In addition, there is evidence to suggest that there may be less induction of higher order aberrations with surface techniques. Long-term stability and safety appear to be extremely satisfactory. The literature supports the use of modern excimer laser surface treatments, with outcomes comparable to those after LASIK and evidence of less induction of higher-order aberrations. Follow-up studies at 10 to 20 years indicate excellent stability and safety.

  12. Three-body dissociations: The photodissociation of dimethyl sulfoxide at 193 nm

    SciTech Connect

    Blank, D.A.; North, S.W.; Stranges, D.

    1997-04-01

    When a molecule with two equivalent chemical bonds is excited above the threshold for dissociation of both bonds, how the rupture of the two bonds is temporally coupled becomes a salient question. Following absorption at 193 nm dimethyl sulfoxide (CH{sub 3}SOCH{sub 3}) contains enough energy to rupture both C-S bonds. This can happen in a stepwise (reaction 1) or concerted (reaction 2) fashion where the authors use rotation of the SOCH{sub 3} intermediate prior to dissociation to define a stepwise dissociation: (1) CH{sub 3}SOCH{sub 3} {r_arrow} 2CH{sub 3} + SO; (2a) CH{sub 3}SOCH{sub 3} {r_arrow} CH{sub 3} + SOCH{sub 3}; and (2b) SOCH{sub 3} {r_arrow} SO + CH{sub 3}. Recently, the dissociation of dimethyl sulfoxide following absorption at 193 nm was suggested to involve simultaneous cleavage of both C-S bonds on an excited electronic surface. This conclusion was inferred from laser induced fluorescence (LIF) and resonant multiphoton ionization (2+1 REMPI) measurements of the internal energy content in the CH{sub 3} and SO photoproducts and a near unity quantum yield measured for SO. Since this type of concerted three body dissociation is very interesting and a rather rare event in photodissociation dynamics, the authors chose to investigate this system using the technique of photofragment translational spectroscopy at beamline 9.0.2.1. The soft photoionization provided by the VUV undulator radiation allowed the authors to probe the SOCH{sub 3} intermediate which had not been previously observed and provided good evidence that the dissociation of dimethyl sulfoxide primarily proceeds via a two step dissociation, reaction 2.

  13. Excimer laser annealing to fabricate low cost solar cells

    NASA Technical Reports Server (NTRS)

    1984-01-01

    The objective is to show whether or not pulsed excimer laser annealing (PELA) of ion-implanted junctions is a cost effective replacement for diffused junctions in fabricating crystalline silicon solar cells. The preliminary economic analysis completed shows that the use of PELA to fabricate both the front junction and back surface field (BSF) would cost approximately 35 cents per peak watt (Wp), compared to a cost of 15 cents/Wp for diffusion, aluminum BSF and an extra cleaning step in the baseline process. The cost advantage of the PELA process depends on improving the average cell efficiency from 14% to 16%, which would lower the overall cost of the module by about 15 cents/Wp. An optimized PELA process compatible with commercial production is to be developed, and increased cell efficiency with sufficient product for adequate statistical analysis demonstrated. An excimer laser annealing station was set-up and made operational. The first experiment used 248 nm radiation to anneal phosphorus implants in polished and texture-etched silicon.

  14. Excimer laser ablation for spatially controlled protein patterns

    NASA Astrophysics Data System (ADS)

    Thissen, Helmut; Hayes, Jason P.; Kingshott, Peter; Johnson, Graham; Harvey, Erol C.; Griesser, Hans J.

    2001-11-01

    Two-dimensional control over the location of proteins on surfaces is desired for a number of applications including diagnostic tests and tissue engineered medical devices. Many of these applications require patterns of specific proteins that allow subsequent two-dimensionally controlled cell attachment. The ideal technique would allow the deposition of specific protein patterns in areas where cell attachment is required, with complete prevention of unspecific protein adsorption in areas where cells are not supposed to attach. In our study, collagen I was used as an example for an extracellular matrix protein known to support the attachment of bovine corneal epithelial cells. An allylamine plasma polymer was deposited on a silicon wafer substrate, followed by grafting of poly(ethylene oxide). Two-dimensional control over the surface chemistry was achieved using a 248 nm excimer laser. Results obtained by XPS and AFM show that the combination of extremely low-fouling surfaces with excimer laser ablation can be used effectively for the production of spatially controlled protein patterns with a resolution of less than 1 micrometers . Furthermore, it was shown that bovine corneal epithelial cell attachment followed exactly the created protein patterns. The presented method is an effective tool for a number of in vitro and in vivo applications.

  15. Excimer laser annealing for fabrication of low-cost solar cells

    NASA Technical Reports Server (NTRS)

    Spitzer, M. B.; Greenwald, A. C.; Hogan, S. J.

    1985-01-01

    Pulsed excimer laser annealing was successfully performed using a 50 w laser. Both polished and texturized cells were tried, however, there are serious problems with nonuniformity on texturized cells. A number of cells were produced and compared to diffusion furnace annealed cells. There was no clear economic advantage in using an excimer laser and there was a small penalty on average efficiency. The conclusion was that the excimer laser anneal process must be able to produce superior cells to be considered as a viable process option.

  16. Excimer Laser Beam Analyzer Based on CVD Diamond

    NASA Astrophysics Data System (ADS)

    Girolami, Marco; Salvatori, Stefano; Conte, Gennaro

    2010-11-01

    1-D and 2-D detector arrays have been realized on CVD-diamond. The relatively high resistivity of diamond in the dark allowed the fabrication of photoconductive "sandwich" strip (1D) or pixel (2D) detectors: a semitransparent light-receiving back-side contact was used for detector biasing. Cross-talk between pixels was limited by using intermediate guard contacts connected at the same ground potential of the pixels. Each pixel photocurrent was conditioned by a read-out electronics composed by a high sensitive integrator and a Σ-Δ ADC converter. The overall 500 μs conversion time allowed a data acquisition rate up to 2 kSPS. The measured fast photoresponse of the samples in the ns time regime suggests to use the proposed devices for fine tuning feedback of high-power pulsed-laser cavities, whereas solar-blindness guarantees high performance in UV beam diagnostics also under high intensity background illumination. Offering unique properties in terms of thermal conductivity and visible-light transparency, diamond represents one of the most suitable candidate for the detection of high-power UV laser emission. The technology of laser beam profiling is evolving with the increase of excimer lasers applications that span from laser-cutting to VLSI and MEMS technologies. Indeed, to improve emission performances, fine tuning of the laser cavity is required. In such a view, the development of a beam-profiler, able to work in real-time between each laser pulse, is mandatory.

  17. Modeling boron profiles in silicon after pulsed excimer laser annealing

    SciTech Connect

    Hackenberg, M.; Huet, K.; Negru, R.; Venturini, J.; Fisicaro, G.; La Magna, A.; Pichler, P.

    2012-11-06

    In this work, we investigated four possible mechanisms which were candidates to explain the shape of boron profiles after ion implantation and melting excimer laser annealing in silicon. A laser with a wavelength of 308 nm and a pulse duration of {approx}180 ns was used. To simulate this process, an existing model for the temperature and phase evolution was complemented with equations for the migration of dopants. Outdiffusion, thermodiffusion, segregation, and adsorption were investigated as possible mechanisms. As a result, we found that outdiffusion and segregation can be excluded as major mechanisms. Thermodiffusion as well as adsorption could both reproduce the build-up at low melt depths, but only adsorption the one at deeper melt depths. In both cases, ion beam mixing during SIMS measurement had to be taken into account to reproduce the measured profiles.

  18. Laser excited fluorescence in the cesium-xenon excimer and the cesium dimer

    NASA Technical Reports Server (NTRS)

    Exton, R. J.; Snow, W. L.; Hillard, M. E.

    1978-01-01

    Argon ion laser lines are used to excite fluorescence in a mixture of cesium and xenon. Excimer band fluorescence is observed at higher pressures (about 1 atm) while at lower pressures (several torr) a diffuse fluorescence due to the cesium dimer is observed whose character changes with exciting wavelength. The excimer fluorescence is shown to be directly related to the location of the exciting wavelength within previously measured Cs/Xe line shapes. This fact suggests that the excimer systems may be efficiently pumped through these line shapes. Qualitative energy-level schemes are proposed to explain the observations in both the excimer and dimer systems.

  19. Self-assembly of a new type of periodic surface structure in a copolymer by excimer laser irradiation above the ablation threshold

    SciTech Connect

    Dorronsoro, Carlos; Siegel, Jan; Bonse, Jörn

    2013-10-21

    We report self-assembly of periodic surface structures in a commercial block copolymer (BCP) (Filofocon A) upon irradiation with a few tens of excimer laser pulses (20 ns, 193 nm) at fluences above the ablation threshold. This new type of structures is characterized by much larger periods than those characteristic for Laser-Induced Periodic Surface Structures (LIPSS) and features nanochains instead of ripples. We find a period of 790 nm at 400 mJ/cm{sup 2}, scaling linearly with laser fluence up to a maximum of 1.0 μm. While an entangled random network of nanochains is produced for normal-incidence and non-polarized light, nanochain alignment can be achieved either by irradiation at an angle or by using linearly polarized light, forming a lamella-like structure. In both cases, the nanochains are aligned parallel to the penetrating polarization orientation and their period does not show a dependence on the angle of incidence, as opposed to the general behavior of standard LIPSS. Also, our results show that the chains are not formed by frozen capillary waves. In contrast, we show analogies of the nanochains produced to lamellar structures fabricated on a smaller scale in other BCP. We discuss the origin of the self-assembly process in terms of a combination of chemical (BCP), optical (surface scattering), and thermal (melting, coarsening, and ablation) effects.

  20. A Medical Excimer Laser System For Corneal Surgery And Laser Angioplasty

    NASA Astrophysics Data System (ADS)

    Caro, R. G.; Muller, D. F.

    1987-03-01

    The authors report the design criteria and performance of the ExciMeda UV200 medical excimer laser system. A beam delivery system for controlled photoablative machining of variable power optical lenses in organic material is described. Some of the potential applications of this delivery system in corneal surgery are presented. The uses of the UV200 laser system in other areas of medical research are discussed and, in particular, its application i the field of laser angioplasty is outlined. There has been considerable interest recently in the use of excimer lasers in a variety of fields in medicine. The ultraviolet, high peak power beam emitted by an excimer laser has been shown to be capable of producing very clean and precise cuts in organic material. In particular, cuts can be made in biological material with minimal disturbance of the material adjacent to the cut. For example, tissue can be cut in such a way as to produce negligible charring or vacuolization in adjacent areas of the tissue. This is in marked contrast to the results when organic material is cut by a continuous wave laser such as an Argon ion laser, or c.w. CO2 laser. The potential applications in clinical settings which are suggested by this feature of the interaction of tissue with excimer laser radiation have been largely unrealized outside the laboratory as yet. A primary reason for this is that, until recently, excimer lasers have been available only in a form that was suitable for the scientific laboratory. These lasers required large amounts of space, were not mobile once installed, and required con nection to external sources of water cooling, vacuum exhaust, a high current electrical supply, and a variety of gas bottles including the gases F2 and C12. These systems were not designed with clinical applications in mind, and thus provided unnecessary performance features at the cost of added complexity. They also posed potential electrical and gaseous safety hazards not suitable for a

  1. Product channels in the 193-nm photodissociation of HCNO (fulminic acid)

    NASA Astrophysics Data System (ADS)

    Feng, Wenhui; Hershberger, John F.

    2016-06-01

    IR diode laser spectroscopy was used to detect the products of HCNO (fulminic acid) photolysis at 193 nm. Six product channels are energetically possible at this photolysis wavelength: O + HCN, H + NCO/CNO, CN + OH, CO + NH, NO + CH and HNCO. In some experiments, isotopically labeled 15N18O, C2D6 or C6H12 reagents were included into the photolysis mixture in order to suppress and/or redirect possible secondary reactions. HCN, OC18O, 15N15NO, CO, DCN and HNCO molecules were detected upon laser photolysis of HCNO/reagents/buffer gas mixtures. Analysis of the yields of product molecules leads to the following photolysis quantum yields: ϕ1a (O + HCN) = 0.38 ± 0.04, ϕ1b (H + (NCO)) = 0.07 ± 0.02, ϕ1c (CN + OH) = 0.24 ± 0.03, ϕ1d (CO + NH(a1Δ)) < 0.22 ± 0.1, ϕ1e (HNCO) = 0.02 ± 0.01 and ϕ1f (CH + NO) = 0.21 ± 0.1, respectively.

  2. Fluorescence Spectra Of Corneal Tissue Under Excimer Laser Irradiation

    NASA Astrophysics Data System (ADS)

    Loree, Thomas R.; Johnson, Tamara M.; Birmingham, Brian S.; McCord, Roy C.

    1988-06-01

    The corneas of pigs' eyes were irradiated with ablative levels of 193, 248, and 308 nm and the spectra of the produced light recorded. In all cases there was an appreciable amount of uv light produced in the 300-400 nm band. The 193 nm irradiation exhibited a threshold at 0.5 J/cm2; markedly different spectra were produced below and above that threshold.

  3. Excimer laser crystallization of amorphous silicon on metallic substrate

    NASA Astrophysics Data System (ADS)

    Delachat, F.; Antoni, F.; Slaoui, A.; Cayron, C.; Ducros, C.; Lerat, J.-F.; Emeraud, T.; Negru, R.; Huet, K.; Reydet, P.-L.

    2013-06-01

    An attempt has been made to achieve the crystallization of silicon thin film on metallic foils by long pulse duration excimer laser processing. Amorphous silicon thin films (100 nm) were deposited by radiofrequency magnetron sputtering on a commercial metallic alloy (N42-FeNi made of 41 % of Ni) coated by a tantalum nitride (TaN) layer. The TaN coating acts as a barrier layer, preventing the diffusion of metallic impurities in the silicon thin film during the laser annealing. An energy density threshold of 0.3 J cm-2, necessary for surface melting and crystallization of the amorphous silicon, was predicted by a numerical simulation of laser-induced phase transitions and witnessed by Raman analysis. Beyond this fluence, the melt depth increases with the intensification of energy density. A complete crystallization of the layer is achieved for an energy density of 0.9 J cm-2. Scanning electron microscopy unveils the nanostructuring of the silicon after laser irradiation, while cross-sectional transmission electron microscopy reveals the crystallites' columnar growth.

  4. Shock propagation and attenuation in high-power excimer lasers

    NASA Astrophysics Data System (ADS)

    Holzwarth, Achim; Berger, Peter; Huegel, Helmut

    1993-05-01

    Theoretical and experimental investigations on the propagation, reflection, and attenuation of shock waves as they occur in excimer lasers have been performed. The numerical simulations have been carried out using a two-dimensional, unsteady finite difference scheme. The experimental setup is a piston driven shock tube with a rectangular cross section working in air at atmospheric pressure. The shocks were detected interferometrically as well as by means of pressure transducers. This shock tube allows us to investigate basic phenomena of shock diffraction which can be used to confirm the computational results in the range of weak shock waves. In particular, the influence of the shape of the wall contour on the reflection of shock waves has been investigated theoretically. The decay time of pressure and density perturbations differs for various wall configurations in such a way that short electrodes accelerate the attenuation as well as does a strong area increase in the vicinity of them. After each laser pulse there is a shock travelling into the laser channel. Experiments have been carried out on the reflection of this shock at a specially formed bend that is able to focus the shock into a muffling element.

  5. Hybrid organometallic compounds of gallium: UV excimer laser photochemistry of Ga( t-C 4H 9) n(CH 3) 3- n ( n = 0, 1, 2, 3)

    NASA Astrophysics Data System (ADS)

    Cleaver, W. M.; Barron, A. R.; Zhang, Y.; Stuke, M.

    1992-01-01

    The gas-phase ultraviolet (UV) excimer laser induced photolysis of the gallium-alkyls Ga( t-C 4H 9) n(CH 3) 3- n ( n = 0, 1, 2, 3) was studied, using photolysis wavelenghts of 308, 248 and 193 nm. The photofragments Ga, GaH and GaCH 3 were detected by laser ionization time-of-flight mass spectroscopy, while the hydrocarbon products CH 4, C 2H 6, HC(CH 3) 3 and H 2C=C(CH 3) 2 were identified using Fourier transform infrared (FTIR) spectroscopy. The formation of the GaH photofragment, and a high olefin-to-alkane product ratio, for Ga( t-C 4H 9) 2(CH 3) and Ga( t-C 4H 9) 3 is interpreted to indicate a β-hydrogen elimination process. However, β-hydrogen elimination only occurs after fission of the weakest Ga-C bond, thus no β-hydride elimination is observed for Ga( t-C 4H 9)(CH 3) 2.

  6. Experimental measurements of multiphoton enhanced air breakdown by a subthreshold intensity excimer laser

    NASA Astrophysics Data System (ADS)

    Way, Jesse; Hummelt, Jason; Scharer, John

    2009-10-01

    This work presents density, spectroscopic temperature, and shockwave measurements of laser induced breakdown plasma in atmospheric air by subthreshold intensity (5.5×109 W/cm2) 193 nm laser radiation. Using molecular spectroscopy and two-wavelength interferometry, it is shown that substantial ionization (>1016 cm-3) occurs that is not predicted by collisional cascade (CC) breakdown theory. While the focused laser irradiance is three orders of magnitude below the theoretical collisional breakdown threshold, the substantial photon energy at 193 nm (6.42 eV/photon) compared with the ionization potential of air (15.6 eV) significantly increases the probability of multiphoton ionization effects. By spectroscopically monitoring the intensity of the N2+ first negative system (B Σu+2-X Σg+2) vibrational bandhead (v'=0,v″=0) at low pressure (20 Torr) where multiphoton effects are dominant, it is shown that two photon excitation, resonant enhanced multiphoton ionization is the primary mechanism for quantized ionization of N2 to the N2+(B Σu+2) state. This multiphoton effect then serves to amplify the collisional breakdown process at higher pressures by electron seeding, thereby reducing the threshold intensity from that required via CC processes for breakdown and producing high density laser formed plasmas.

  7. Understanding dissolution behavior of 193nm photoresists in organic solvent developers

    NASA Astrophysics Data System (ADS)

    Lee, Seung-Hyun; Park, Jong Keun; Cardolaccia, Thomas; Sun, Jibin; Andes, Cecily; O'Connell, Kathleen; Barclay, George G.

    2012-03-01

    Herein, we investigate the dissolution behavior of 193-nm chemically amplified resist in different organic solvents at a mechanistic level. We previously reported the effect of solvent developers on the negative tone development (NTD) process in both dry and immersion lithography, and demonstrated various resist performance parameters such as photospeed, critical dimension uniformity, and dissolution rate contrast are strongly affected by chemical nature of the organic developer. We further pursued the investigation by examining the dependence of resist dissolution behavior on their solubility properties using Hansen Solubility Parameter (HSP). The effects of monomer structure, and resist composition, and the effects of different developer chemistry on dissolution behaviors were evaluated by using laser interferometry and quartz crystal microbalance. We have found that dissolution behaviors of methacrylate based resists are significantly different in different organic solvent developers such as OSDTM-1000 Developer* and n-butyl acetate (nBA), affecting their resist performance. This study reveals that understanding the resist dissolution behavior helps to design robust NTD materials for higher resolution imaging.

  8. Photochemistry of cyano- and dicyanoacetylene at 193 nm

    SciTech Connect

    Halpern, J.B.; Petway, L.; Lu, R.; Jackson, W.M.; McCrary, V.R. ); Nottingham, W. )

    1990-03-08

    The far-UV photochemistry of cyano- and dicyanoacetylene has been studied. In particular, those photolysis channels have been characterized that lead to the production of excited-state fragments and CN in the ground electronic state. Following photolysis of HC{sub 3}N, in addition to direct production of CN and C{sub 2}H, there is a second dissociation channel leading to C{sub 3}N and H atoms. The results also show that at high laser intensity the HC{sub 3}N dissociates by two-photon photolysis and that the C{sub 3}N undergoes secondary photolysis. Photolysis of C{sub 4}NH{sub 2} produces CN and C{sub 3}N radicals.

  9. Advanced excimer laser technologies enable green semiconductor manufacturing

    NASA Astrophysics Data System (ADS)

    Fukuda, Hitomi; Yoo, Youngsun; Minegishi, Yuji; Hisanaga, Naoto; Enami, Tatsuo

    2014-03-01

    "Green" has fast become an important and pervasive topic throughout many industries worldwide. Many companies, especially in the manufacturing industries, have taken steps to integrate green initiatives into their high-level corporate strategies. Governments have also been active in implementing various initiatives designed to increase corporate responsibility and accountability towards environmental issues. In the semiconductor manufacturing industry, there are growing concerns over future environmental impact as enormous fabs expand and new generation of equipments become larger and more powerful. To address these concerns, Gigaphoton has implemented various green initiatives for many years under the EcoPhoton™ program. The objective of this program is to drive innovations in technology and services that enable manufacturers to significantly reduce both the financial and environmental "green cost" of laser operations in high-volume manufacturing environment (HVM) - primarily focusing on electricity, gas and heat management costs. One example of such innovation is Gigaphoton's Injection-Lock system, which reduces electricity and gas utilization costs of the laser by up to 50%. Furthermore, to support the industry's transition from 300mm to the next generation 450mm wafers, technologies are being developed to create lasers that offer double the output power from 60W to 120W, but reducing electricity and gas consumption by another 50%. This means that the efficiency of lasers can be improve by up to 4 times in 450mm wafer production environments. Other future innovations include the introduction of totally Heliumfree Excimer lasers that utilize Nitrogen gas as its replacement for optical module purging. This paper discusses these and other innovations by Gigaphoton to enable green manufacturing.

  10. Synthesis of fluorinated materials for 193-nm immersion lithography and 157-nm lithography

    NASA Astrophysics Data System (ADS)

    Yamashita, T.; Ishikawa, T.; Yoshida, T.; Hayamai, T.; Araki, Takayuki; Aoyama, H.; Hagiwara, T.; Itani, Toshiro; Fujii, Kiyoshi

    2005-05-01

    Various fluorinated polymers were synthesized for application in 193-nm immersion lithography with the goal of improving 157-nm photoresist performance. Their fundamental properties were characterized, such as transparency at 193-nm and 157-nm (wavelength) and solubility in water and a standard alkaline developer. High transparency, i.e., absorbance better than 0.3 μm-1 at 193-nm wavelength, was achieved. The dissolution behaviors of them were studied by using the Quartz Crystal Microbalance (QCM) method. We find that the dissolution rate of Poly(norbornene-2-fluoro-2-hexafluoroalchol) (PNB1FVIP) in 0.065N tetramethylammonium hydroxide (TMAH) was >200 times (nm/s) faster than that of the copolymer of tetrafluoroethylene (TFE) and norbornene-2-fluoro-2-hexafluoroalchol (TFE/NB1FVIP). A resist based on TFE/NB1FVIP was able to delineate 75 nm dense lines by exposure at 193-nm (wavelength) with an alternating phase shift mask using a 0.75 NA ArF scanner. The dissolution rates of the fluoropolymers in water and a 0.262N and 0.065 TMAH can be controlled by optimizing counter monomers containing hexafluoroisopropanol (HFA) unit, carboxylic acid unit and so on. In addition, we have collect water contact angle data. This data shows that fluoropolymers can be used as resist cover materials for 193-nm immersion lithography.

  11. Percutaneous transluminal excimer laser angioplasty in total peripheral artery occlusion in man

    SciTech Connect

    Wollenek, G.; Laufer, G.; Grabenwoeger, F.

    1988-01-01

    Laser angioplasty and laser-assisted angioplasty have become a clinical reality. Producing sharply defined borders of the ablated area with minimal adjacent thermal damage, excimer lasers offer several proven and some potential advantages over conventional systems. To evaluate the feasibility of excimer laser angioplasty, we have treated one patient using 308-nm radiation via a bare fiber in direct contact with the total occlusion of a right femoral artery. The lesion was successfully recanalized, thus allowing easy passage of the balloon catheter and subsequent dilatation. This percutaneous laser recanalization of an occluded peripheral artery is one of the first to be done in man using excimer laser radiation, thus demonstrating that the technique is feasible and the system is potentially useful.

  12. Excimer lasers. (Latest citations from the US Patent bibliographic file with exemplary claims). Published Search

    SciTech Connect

    1995-01-01

    The bibliography contains citations of selected patents concerning the design and development of excimer laser devices, apparatus, and systems for use in industrial and medical applications. Citations discuss ablation and lithography technology, compact excimer lasers, laser gas purification and recycling, microwave and discharge excited lasers, and rare gas halides. Applications are considered, including metallization and patterning, manufacturing of ophthalmic lenses, profiling of optical surfaces, treatment of engine parts, prosthetic surgery, and corneal ablation. (Contains a minimum of 106 citations and includes a subject term index and title list.)

  13. Excimer lasers. (Latest citations from the US Patent Bibliographic file with exemplary claims). Published Search

    SciTech Connect

    1996-01-01

    The bibliography contains citations of selected patents concerning the design and development of excimer laser devices, apparatus, and systems for use in industrial and medical applications. Citations discuss ablation and lithography technology, compact excimer lasers, laser gas purification and recycling, microwave and discharge excited lasers, and rare gas halides. Applications are considered, including metallization and patterning, manufacturing of ophthalmic lenses, profiling of optical surfaces, treatment of engine parts, prosthetic surgery, and corneal ablation. (Contains 50-250 citations and includes a subject term index and title list.) (Copyright NERAC, Inc. 1995)

  14. Absorption coefficients for water vapor at 193 nm from 300 to 1073 K

    NASA Technical Reports Server (NTRS)

    Kessler, W. J.; Carleton, K. L.; Marinelli, W. J.

    1993-01-01

    Measurements of the water absorption coefficient at 193 nm from 300 to 1073 K are reported. The measurements were made using broadband VUV radiation and a monochromator-based detection system. The water vapor was generated by a saturator and metered into a flowing, 99 cm absorption cell via a water vapor mass flow meter. The 193 nm absorption coefficient measurements are compared to room temperature and high temperature shock tube measurements with good agreement. The absorption can be parameterized by a nu3 vibrational mode reaction coordinate and the thermal population of the nu3 mode.

  15. Excimer laser debridement of necrotic erosions of skin without collateral damage

    NASA Astrophysics Data System (ADS)

    Wynne, James J.; Felsenstein, Jerome M.; Trzcinski, Robert; Zupanski-Nielsen, Donna; Connors, Daniel P.

    2011-07-01

    Pulsed ArF excimer laser radiation at 6.4 eV, at fluence exceeding the ablation threshold, will debride burn eschar and other dry necrotic erosions of the skin. Debridement will cease when sufficiently moist viable tissue is exposed, due to absorption by aqueous chloride ions (Cl-) through the non-thermal process of electron photodetachment, thereby inhibiting collateral damage to the viable tissue. ArF excimer laser radiation debrides/ablates ~1 micron of tissue with each pulse. While this provides great precision in controlling the depth of debridement, the process is relatively time-consuming. In contrast, XeCl excimer laser radiation debrides ~8 microns of tissue with each pulse. However the 4.0 eV photon energy of the XeCl excimer laser is insufficient to photodetach an electron from a Cl- ion, so blood or saline will not inhibit debridement. Consequently, a practical laser debridement system should incorporate both lasers, used in sequence. First, the XeCl excimer laser would be used for accelerated debridement. When the necrotic tissue is thinned to a predetermined thickness, the ArF excimer laser would be used for very precise and well-controlled debridement, removing ultra-thin layers of material with each pulse. Clearly, the use of the ArF laser is very desirable when debriding very close to the interface between necrotic tissue and viable tissue, where the overall speed of debridement need not be so rapid and collateral damage to viable tissue is undesirable. Such tissue will be sterile and ready for further treatment, such as a wound dressing and/or a skin graft.

  16. Laser-induced photoacoustic imaging for characterizing biological tissues

    NASA Astrophysics Data System (ADS)

    El-Sharkawy, Yasser H.; Badr, Yehia; Hassan, Mahmoud

    2005-04-01

    Time-resolved photoacoustic imaging has been used to characterize Breast tissues for the purpose of discriminating between normal and Cancerous tumor areas of tissue. Ultrasonic thermoelastic waves were generated in Breast tissue by the absorption of nanosecond laser pulses at 193 nm produced by a frequency doubled Q-switched excimer laser in conjunction with an optical interferometer sensor was used to detect the thermoelastic and thermal waves. At 193 nm, differences in photoacoustic and photothermal signatures of normal tissue and Cancerous tumor were found to be highly enhanced. There was a clear and reproducible difference between the photacoustic and photothermal response of Cancerous tumor and normal tissue as a result of increased optical attenuation in Cancerous tumor. At 193 nm, the generation of subsurface thermoelastic waves provided a means of determining the structure and thickness of the tissue sample. The thermal waves provided a mean of determination the optical absorption of the tissue sample.

  17. Excimer laser-induced formation of metallic microstructures by electroless copper plating

    NASA Astrophysics Data System (ADS)

    Yang, H.; Pan, C.-T.

    2002-03-01

    Micro-patterns created by the excimer laser and activated by reactants for electroless copper plating are described in this paper. The generated micro-patterns are transformed into copper patterns on the substrate and copper microstructures are formed. This method simplifies the manufacturing process of making circuits on boards compared with the conventional lithography process of forming copper patterns on the substrate. Micro-patterns generated by the excimer laser cause changes of surface electric properties and activation selectively. A chemical reaction through these activated areas may deposit metal, such as copper. The KrF excimer laser not only provides simple and fast machining patterns, but also uses its high-energy density to drill holes and circuits directly. Palladium ions are added as mediators in the electroless plating solution to enable a continuous electroless copper deposition. According to the experiment of excimer laser-assisted electroless copper plating, the procedures of pretreatment and post-cleaning are the key factors that resulted in excellent selective plating. The samples were pretreated by sodium dodecyl sulfate (SDS) and post-cleaned by acetone and diluted nitric acid resulting in distinct micro-patterns. The deposition area is confined to the excimer laser-ablated portion resulting in good selective plating.

  18. Results from a new 193nm die-to-database reticle inspection platform

    NASA Astrophysics Data System (ADS)

    Broadbent, William H.; Alles, David S.; Giusti, Michael T.; Kvamme, Damon F.; Shi, Rui-fang; Sousa, Weston L.; Walsh, Robert; Xiong, Yalin

    2010-05-01

    A new 193nm wavelength high resolution reticle defect inspection platform has been developed for both die-to-database and die-to-die inspection modes. In its initial configuration, this innovative platform has been designed to meet the reticle qualification requirements of the IC industry for the 22nm logic and 3xhp memory generations (and shrinks) with planned extensions to the next generation. The 22nm/3xhp IC generation includes advanced 193nm optical lithography using conventional RET, advanced computational lithography, and double patterning. Further, EUV pilot line lithography is beginning. This advanced 193nm inspection platform has world-class performance and the capability to meet these diverse needs in optical and EUV lithography. The architecture of the new 193nm inspection platform is described. Die-to-database inspection results are shown on a variety of reticles from industry sources; these reticles include standard programmed defect test reticles, as well as advanced optical and EUV product and product-like reticles. Results show high sensitivity and low false and nuisance detections on complex optical reticle designs and small feature size EUV reticles. A direct comparison with the existing industry standard 257nm wavelength inspection system shows measurable sensitivity improvement for small feature sizes

  19. A comparison of the characteristics of excimer and femtosecond laser ablation of acrylonitrile butadiene styrene (ABS)

    NASA Astrophysics Data System (ADS)

    See, Tian Long; Liu, Zhu; Li, Lin; Zhong, Xiang Li

    2016-02-01

    This paper presents an investigation on the ablation characteristics of excimer laser (λ = 248 nm, τ = 15 ns) and femtosecond laser (λ = 800 nm, τ = 100 fs) on ABS polymer sheets. The laser-material interaction parameters (ablation threshold, optical penetration depth and incubation factor) and the changes in material chemical properties were evaluated and compared between the two lasers. The work shows that the ablation threshold and effective optical penetration depth values are dependent on the wavelength of laser beam (photon energy) and the pulse width. The ablation threshold value is lower for the excimer laser ablation of ABS (Fth = 0.087 J/cm2) than that for the femtosecond laser ablation of ABS (Fth = 1.576 J/cm2), demonstrating a more dominating role of laser wavelength than the pulse width in influencing the ablation threshold. The ablation depth versus the logarithmic scale of laser fluence shows two linear regions for the fs laser ablation, not previously known for polymers. The effective optical penetration depth value is lower for excimer laser ablation (α-1 = 223 nm) than that for femtosecond laser ablation (α-1 = 2917 nm). The ablation threshold decreases with increasing number of pulses (NOP) due to the chain scission process that shortens the polymeric chains, resulting in a weaker polymeric configuration and the dependency is governed by the incubation factor. Excimer laser treatment of ABS eliminates the Cdbnd C bond completely through the chain scission process whereas Cdbnd C bond is partially eliminated through the femtosecond laser treatment due to the difference in photon energy of the two laser beams. A reduction in the Cdbnd C bond through the chain scission process creates free radical carbons which then form crosslinks with each other or react with oxygen, nitrogen and water in air producing oxygen-rich (Csbnd O and Cdbnd O bond) and nitrogen-rich (Csbnd N) functional groups.

  20. Excimer laser debulking for percutaneous coronary intervention in left main coronary artery disease.

    PubMed

    Topaz, On; Polkampally, Pritam R; Mohanty, Pramod K; Rizk, Maged; Bangs, Julie; Bernardo, Nelson L

    2009-11-01

    Excimer laser has been successfully applied to complex atherosclerotic plaques in acute coronary syndromes; however, its role in debulking in left main coronary artery disease has not been fully explored. Details of a series of 20 patients who underwent excimer laser revascularization of a spectrum of left main coronary artery lesions are presented. Twenty symptomatic patients who received excimer laser debulking were examined for procedural outcome and follow up results. The left main coronary artery was characterized as protected, semi-protected, poorly protected, or unprotected, depending on the presence or absence of patent bypass grafts to the left anterior descending (LAD) and circumflex (CX) arteries. A fully protected left main coronary artery (LMCA) was present in only 20% of the patients. The target lesions included 11(55%) distal LMCA stenoses, six (30%) ostial stenoses, and one (5%) mid-portion lesions. Two (10%) patients had in-stent re-stenosis of the entire length of the LMCA. Small (0.7 mm-1.4 mm) excimer laser catheters were mostly used. A relatively high number of laser energy pulses (1,334 +/- 643) were required to achieve adequate debulking. Successful LMCA intervention was performed in 19 (95%) patients, while in-hospital complications occurred in only one (5%) patient. Subacute/late stent thrombosis developed 3 months after the procedure in one patient, and two patients died from non-cardiac causes during follow-up. Lesions in LMCAs can be revascularized in selected patients by laser debulking and adjunct stenting. Inadequate protection by bypass grafts and decreased left ventricular function do not contradict utilization of excimer laser. Small laser catheters and high energy levels are required during laser debulking of stenoses of left main coronary arteries.

  1. Particle Generation by Pulsed Excimer Laser Ablation in Liquid: Hollow Structures and Laser-Induced Reactions

    NASA Astrophysics Data System (ADS)

    Yan, Zijie

    2011-12-01

    Pulsed laser ablation of solid targets in liquid media is a powerful method to fabricate micro-/nanoparticles, which has attracted much interest in the past decade. It represents a combinatorial library of constituents and interactions, and one can explore disparate regions of parameter space with outcomes that are impossible to envision a priori. In this work, a pulsed excimer laser (wavelength 248 nm, pulse width 30 ns) has been used to ablate targets in liquid media with varying laser fluences, frequencies, ablation times and surfactants. It is observed that hollow particles could be fabricated by excimer laser ablation of Al, Pt, Zn, Mg, Ag, Si, TiO2, and Nb2O5 in water or aqueous solutions. The hollow particles, with sizes from tens of nanometers to micrometers, may have smooth and continuous shells or have morphologies demonstrating that they were assembled from nanoparticles. A new mechanism has been proposed to explain the formation of these novel particle geometries. They were formed on laser-produced bubbles through bubble interface pinning by laser-produced solid species. Considering the bubble dynamics, thermodynamic and kinetic requirements have been discussed in the mechanism that can explain some phenomena associated with the formation of hollow particles, especially (1) larger particles are more likely to be hollow particles; (2) Mg and Al targets have stronger tendency to generate hollow particles; and (3) the 248 nm excimer laser is more beneficial to fabricate hollow particles in water than other lasers with longer wavelengths. The work has also demonstrated the possiblities to fabricate novel nanostructures through laser-induced reactions. Zn(OH)2/dodecyl sulfate flower-like nanostructures, AgCl cubes, and Ag2O cubes, pyramids, triangular plates, pentagonal rods and bars have been obtained via reactions between laser-produced species with water, electrolyes, or surfactant molecules. The underlying mechanisms of forming these structures have been

  2. Primary success and one-year followup of percutaneous peripheral excimer laser angioplasty

    NASA Astrophysics Data System (ADS)

    Visona, Adriana; Liessi, Guido; Miserocchi, Luigi; Bonanome, Andrea; Lusiani, Luigi; Breggion, Giovanni; Pagnan, Antonio

    1992-08-01

    Excimer laser angioplasty was performed in 59 patients (44 males and 17 females, mean age 63 +/- 9 years, range 39 - 77) affected by peripheral vascular disease. Fifty patients had a total occlusion of the superficial femoral artery, three of the iliac artery, and one of the popliteal artery; seven patients showed a subocclusive stenosis of the superficial femoral artery. A commercial excimer laser (Technolas Max-10) was used at the Xenon-Chloride wavelength of 308 nm. The laser operated at 120 ns pulse length and at 20 Hz repetition rate. Applied energy fluence was 20 mJ/pulse. The energy was delivered through a multifiber catheter, which combines 12 (7F) or 18 (9F) fibers (260 micron diameter each), concentrically arranged. Balloon dilatation was associated in 51 patients. Successful recanalization was obtained in 59 out of 61 patients (97%). Failure to recanalize the occluded arteries occurred in two cases, and was due to dissection. Early thrombosis and reocclusion (within 48 hours) was observed in five patients. The cumulative patency rate was 56% at one year. On the basis of these results, excimer laser assisted angioplasty seems a feasible and safe procedure. However, this technique did not solve the restenosis problem. A wide application of excimer laser as a stand alone approach can be foreseen for treatment of peripheral vascular disease.

  3. Studies on a cross-linking type positive 193nm photoresist material

    NASA Astrophysics Data System (ADS)

    Wang, Liyuan; Guo, Xin; Chu, Zhanxing; Wang, Wenjun

    2006-03-01

    A kind of diacid, acrylpimaric acid, with condensed alicyclic structure and good film-forming property, was prepared by the Diels-Alder reaction of abietic acid and acrylic acid. In their solid film, the diacid can react with divinyl ether, such as 1,3-divinyloxyethoxybenzene when baked above 80 °C and become insoluble in dilute aqueous base. Thus formed compound can be quickly decomposed at the presence of strong acid generated by PAG above 100 °C and become easily soluble in dilute aqueous base. A positive photoresist can be formed by the diacid, divinyl ether and PAG. The measured photosensitivity is less than 50 mj/cm2 when exposed to low pressure Hg lamp (254nm). The diacid mixture displayed lower transparency than estimated at 193 nm and should be further purified to be used in 193 nm photoresist.

  4. Faster qualification of 193-nm resists for 100-nm development using photo cell monitoring

    NASA Astrophysics Data System (ADS)

    Jones, Chris M.; Kallingal, Chidam; Zawadzki, Mary T.; Jeewakhan, Nazneen N.; Kaviani, Nazila N.; Krishnan, Prakash; Klaum, Arthur D.; Van Ess, Joel

    2003-05-01

    The development of 100-nm design rule technologies is currently taking place in many R&D facilities across the world. For some critical alyers, the transition to 193-nm resist technology has been required to meet this leading edge design rule. As with previous technology node transitions, the materials and processes available are undergoing changes and improvements as vendors encounter and solve problems. The initial implementation of the 193-nm resits process did not meet the photolithography requirements of some IC manufacturers due to very high Post Exposure Bake temperature sensitivity and consequently high wafer to wafer CD variation. The photoresist vendors have been working to improve the performance of the 193-nm resists to meet their customer's requirements. Characterization of these new resists needs to be carried out prior to implementation in the R&D line. Initial results on the second-generation resists evaluated at Cypress Semicondcutor showed better CD control compared to the aelrier resist with comparable Depth of Focus (DOF), Exposure Latitute, Etch Resistance, etc. In addition to the standard lithography parameters, resist characterization needs to include defect density studies. It was found that the new resists process with the best CD control, resulted in the introduction of orders of magnitude higher yield limiting defects at Gate, Contact adn Local Interconnect. The defect data were shared with the resists vendor and within days of the discovery the resist vendor was able to pinpoint the source of the problem. The fix was confirmed and the new resists were successfully released to production. By including defect monitoring into the resist qualification process, Cypress Semiconductor was able to 1) drive correction actions earlier resulting in faster ramp and 2) eliminate potential yield loss. We will discuss in this paper how to apply the Micro Photo Cell Monitoring methodology for defect monitoring in the photolithogprhay module and the

  5. Formation of short high-power laser radiation pulses in excimer mediums

    NASA Astrophysics Data System (ADS)

    Losev, V. F., Sr.; Ivanov, N. G.; Panchenko, Yu. N.

    2007-06-01

    Presently an excimer mediums continue are examined as one of variants for formation of powerful and over powerful pulses of laser radiation with duration from units of nanosecond up to tens femtosecond. The researches on such powerful installations as "NIKE" (USA) and << SUPER ASHURA >>, Japan) proceed in this direction. The main advantage of excimer mediums is the opportunity to work in a frequency mode, absence of restriction on the size of active area, high uniformity of a gas working medium, high efficiency (up to 10 %) and wide spectral range of laser radiation (KrF, XeCl ~ 2nm, XeF (C-A), Xe IICl ~ 50-100 nanometers). Research in area of high quality laser beams formation in excimer mediums and its amplification in high power amplifiers are carried out the long time in Institute of High Current Electronics SB RAS, Tomsk, Russia. The wide aperture XeCl laser system of MELS-4k is used for these investigations. Last time we take part in program on development of high power excimer laser system with a petawatt level of power. This system supposes the formation and amplification high quality laser beams with different pulse duration from units of nanosecond up to tens femtosecond. We research the possibility of laser beams formation in excimer mediums with ps-ns pulse duration having the low noise and divergence near to diffraction limit. In other hand, we are developing the wide aperture XeF(C-A) amplifier with optical pump on base electron accelerator. According to our estimations of the XeF(C-A) amplifier based on the converter of e-beam energy to the Xe II* fluorescence at 172 nm will allow to obtain up to 100 TW peak power in a 30 fs pulse.

  6. Dual-layer dye-filled developer-soluble BARCs for 193-nm lithography

    NASA Astrophysics Data System (ADS)

    Meador, James D.; Beaman, Carol; Stroud, Charlyn; Lowes, Joyce A.; Zhu, Zhimin; Guerrero, Douglas J.; Mercado, Ramil-Marcelo L.; Drain, David

    2008-03-01

    A family of dye-filled developer-soluble bottom anti-reflective coatings (BARCs) has been developed for use in 193-nm microlithography. This new dye-filled chemical platform easily provides products covering a wide range of optical properties. The light-sensitive and positive-working BARCs use a transparent polymeric binder and a polymeric dye in a thermally crosslinking formulation, with the cured products then being photochemically decrosslinked prior to development. The cured BARC films are imaged and removed with developer in the same steps as the covering photoresist. Two dye-filled BARCs with differing optical properties were developed via a series of DOEs and then used as a dual-layer BARC stack. Lithography with this BARC stack, using a 193-nm resist, gave 150-nm L/S (1:1). A 193-nm dual-layer BARC stack (gradient optical properties) from the well-established dye-attached family of light-sensitive BARCs also gave 150-nm L/S (1:1) with the same resist. However, the latter provided much improved line shape with no scumming. The targeted application for light-sensitive dual-layer BARCs is high-numerical aperture (NA) immersion lithography where a single-layer BARC will not afford the requisite reflection control.

  7. Excimer laser coronary atherectomy in septal collaterals during retrograde recanalization of a chronic total occlusion

    PubMed Central

    Ohlow, Marc-Alexander; Lotze, Ullrich; Lauer, Bernward

    2011-01-01

    Management of chronic total occlusions has been refined through the development of a retrograde approach via collateral pathways. We describe here the use of excimer laser coronary atherectomy in the septal collaterals. This appraoch was not yet described in the literature. PMID:22355487

  8. Comparison of acid-generating efficiencies in 248 and 193-nm photoresists

    NASA Astrophysics Data System (ADS)

    Cameron, James F.; Chan, Nicholas; Moore, Kathryn; Pohlers, Gerd

    2001-08-01

    Photoacid generation is a critical step in the application of chemically amplified (CA) resist technology. During the key exposure step, a catalytic amount of a strong Bronsted acid is released within these resists. The photoacid is subsequently used in a post-exposure bake step to catalytically react with the resist polymer. In the case of a positive tone resist, an acid sensitive polymer is deprotected to render the exposed areas soluble in dilute aqueous base thereby allowing for pattern development. As the semicondutor industry beings to focus on developing 193 nm photoresists for production, it si important to identify and understand differences between prototype 193nm CA resists and current state of the art 248nm production worth photoresists. The major difference between 193 and 248 nm photoresists is the exposure wavelength, which isr educed to achieve higher resolution based on the Rayleigh equation. However, this change in wavelength has several ramifications: Firstly, the tried, tested and true phenolic polymers used in DUV resists are too absorbent to be used fo 193nm application and had to be replaced by low absorbing, non-aromatic systems. Second, since even these new platforms are still more absorbing at 193 nm than the phenolic matrices are at 248nm, the PAG loading had to be lowered significantly in order to keep the overall absorbance of the resist down. This paper descibes the results of our systematic studies on understanding the reasons for observed differences in photoacid generating efficincy between 193 and 248nm chemically amplified resist systems. First the wavelength effect is studied by comparing the relative acid generating efficiency of onium type PAGs in a prototype 193nm and a DUV photoresist at both 193 nm and 248 nm exposure. Second, the photoacid generating efficiency for these PAGs at 238 nm is compared in both phenolic and non-phenolic based photoresists to probe resist polymer matrix effects. Third, these experiments were

  9. Excimer laser material processing: state-of-the-art and new approaches in microsystem technology

    NASA Astrophysics Data System (ADS)

    Pfleging, W.; Przybylski, M.; Brückner, H. J.

    2006-02-01

    In this paper the current state of the art and new trends in excimer laser processing of polymer materials are presented. Two processing regimes are of general interest: below and above the ablation threshold. The modification of polymer surface can be carried out by laser processing below ablation threshold. This is successfully demonstrated for the fabrication of optical singlemode waveguides in PMMA for the visible optical range and for 1550 nm. The obtained structures reveal absorption losses in the order of 1.4 dB/cm up to 5 dB/cm. Laser exposure using contact masks or direct scanning of planar structures are appropriate methods for the integration of optical waveguides in PMMA sensor devices (Y-branch). Above the ablation threshold excimer laser micromachining is a powerful tool for a rapid manufacturing of complex three-dimensional micro-structures in polymer surfaces with depths between 0.1 μm and 1000 μm and aspect ratios up to 10. Typical application fields are presented in micro-optics, micro-fluidics and rapid tooling. Micro-Laser-LIGA is established in order to fabricate nebulizer membranes, micro-fluidic devices and integrated single mode waveguides. Furthermore, the fabrication of 3d-shapes in metallic mold inserts is successfully demonstrated. Debris formation is completely suppressed. Polymer structuring with a low power short pulse excimer laser with high repetition rates up to 500 Hz is compared to the structuring with a "conventional" high power excimer laser with a repetition rate of about 10-100Hz as well as with a UV-Nd:YAG (1-2 kHz). These "high-repetition-rateexcimer lasers" with relatively small pulse energies but with much shorter laser pulse duration (< 6 ns) provide a significant improvement of pattern quality. Furthermore, the high repetition rate enables a fast material processing which is discussed in detail for several application fields.

  10. Spectrally narrowed lasing of a self-injection KrF excimer laser

    NASA Astrophysics Data System (ADS)

    Shimada, Yasuhiro; Wani, Koichi; Miki, Tadaaki; Kawahara, Hidehito; Mimasu, Mutsumi; Ogata, Yoshiro

    1990-08-01

    Spectrally nantwed lasing of a KrF excimer laser has teen ahieved by a self-injection technique using abeam splitter for power extraction aixi intravity etalons for spectral-narrowing. The laser cavity is divithi into an amplifying branch aix! a spectralnarrowing branch. The spectral bandwidth was narrowed to <3pm FWHM with air-sed etalons placed in the spectral-narrowing branch. A laser propagation model was intrOdUced for describing the laser intensity traveling in the laser cavity. The calculated intensityincident onthe intracavityetalons wassmaller thanthat in theconventional Fabry-Perotcavity withplane-parallel mirrors.

  11. Generation of picosecond UV pulses by an Nd{sup 3+}:YAG laser for amplification in an ArF amplifier

    SciTech Connect

    Sadovskiy, S P; Chizhov, P A; Bukin, V V; Brendel', V M; Dolmatov, T V; Polivanov, Yu N; Vorob'ev, N S; Smirnov, A V; Garnov, S V; Vartapetov, S K

    2015-03-31

    The scheme generating UV pulses with a duration 15 ps and output energy up to 11.5 mJ is implemented in the system consisting of a picosecond Nd{sup 3+}:YAG laser with multistage nonlinearoptical conversion of fundamental frequency radiation into radiation with a wavelength 193 nm followed by an excimer ArF amplifier. The temporal characteristics and the contrast of the amplified pulses are measured. (lasers)

  12. Development of the pellicle for KrF excimer laser photolithography

    NASA Astrophysics Data System (ADS)

    Shirasaki, Toru; Kawakami, S.; Hamada, Y.; Nagata, Y.; Kashida, Meguru; Kubota, Yoshihiro

    1994-11-01

    This paper describes development of the pellicle for KrF excimer laser photolithography. The components of KrF excimer pellicle should have high light resistance. Our pellicle membrane consists of amorphous perfluoropolymer. Since this material provides that scattering and absorption of light at deep-UV wavelength region are very small, transmissivity is high at that wavelength and light resistance is strong against KrF excimer laser. Membrane bond and reticle adhesive consist of silicone resin so that the light resistance of them is high. And the bond strength of our pellicle is very high despite the use of fluoro-polymer membrane. This is because the bond consists of silicone resin which contains fluorocarbon-group. Strict particle suppression is required for the excimer pellicle. We have covered the frame with UV resistant fluoropolymer for the purpose to reduce the possibility of particle generation. This treatment has suppressed the particle generation during transportation. Membrane cutting has been achieved by melt-cutting method. The prominency of this method is melting the membrane with heat and cutting it with no contact with pellicle frame, so that the membrane edge becomes smooth and pellicle frame has not been damaged.

  13. 193 nm deep-ultraviolet solar-blind cubic boron nitride based photodetectors

    NASA Astrophysics Data System (ADS)

    Soltani, A.; Barkad, H. A.; Mattalah, M.; Benbakhti, B.; De Jaeger, J.-C.; Chong, Y. M.; Zou, Y. S.; Zhang, W. J.; Lee, S. T.; BenMoussa, A.; Giordanengo, B.; Hochedez, J.-F.

    2008-02-01

    Deep-ultraviolet (DUV) solar-blind photodetectors based on high-quality cubic boron nitride (cBN) films with a metal/semiconductor/metal configuration were fabricated. The design of interdigitated circular electrodes enables high homogeneity of electric field between pads. The DUV photodetectors present a peak responsivity at 180nm with a very sharp cutoff wavelength at 193nm and a visible rejection ratio (180 versus 250nm) of more than four orders of magnitude. The characteristics of the photodetectors present extremely low dark current, high breakdown voltage, and high responsivity, suggesting that cBN films are very promising for DUV sensing.

  14. Chemical trimming overcoat: an enhancing composition and process for 193nm lithography

    NASA Astrophysics Data System (ADS)

    Liu, Cong; Rowell, Kevin; Joesten, Lori; Baranowski, Paul; Kaur, Irvinder; Huang, Wanyi; Leonard, JoAnne; Jeong, Hae-Mi; Im, Kwang-Hwyi; Estelle, Tom; Cutler, Charlotte; Pohlers, Gerd; Yin, Wenyan; Fallon, Patricia; Li, Mingqi; Jeon, Hyun; Xu, Cheng Bai; Trefonas, Pete

    2016-03-01

    As the critical dimension of devices is approaching the resolution limit of 193nm photo lithography, multiple patterning processes have been developed to print smaller CD and pitch. Multiple patterning and other advanced lithographic processes often require the formation of isolated features such as lines or posts by direct lithographic printing. The formation of isolated features with an acceptable process window, however, can pose a challenge as a result of poor aerial image contrast at defocus. Herein we report a novel Chemical Trimming Overcoat (CTO) as an extra step after lithography that allows us to achieve smaller feature size and better process window.

  15. Top surface imaging process and materials development for 193 nm and extreme ultraviolet lithography

    SciTech Connect

    Rao, V.; Hutchinson, J.; Holl, S.; Langston, J.; Henderson, C.; Wheeler, D.R.; Cardinale, G.; OConnell, D.; Goldsmith, J.; Bohland, J.; Taylor, G.; Sinta, R.

    1998-11-01

    The maturity and acceptance of top surface imaging (TSI) technology have been hampered by several factors including inadequate resist sensitivity and line edge roughness. We have found that the use of a chemically amplified resist can improve the sensitivity in these systems by 1.5{endash} 2{times} without compromising the line edge roughness. In addition, we have shown improved line edge roughness by increasing the molecular weight of the polymeric resin in the resist. Using these materials approaches, we have been able to show excellent resolution images with the TSI process for both 193 nm and extreme ultraviolet (13.4 nm) patterning. {copyright} {ital 1998 American Vacuum Society.}

  16. Structure-process-property relations in excimer laser surface processed Ti-6Al-4V alloy

    SciTech Connect

    Jervis, T.R.; Zocco, T.G.; Steele, J.H. Jr.

    1990-01-01

    Excimer laser processing results in very rapid solidification of metal surfaces. In addition to mixing or segregation processes, rapid heat treatment can result in phase transformations which yield beneficial surface properties. We have investigated the effect of pulsed excimer laser radiation on the microstructure and surface hardness of Ti-6Al-4V alloy. This material undergoes a well defined martensite transformation during rapid quenching from temperatures in the {beta} phase field. The depth of the transformed layer is thus a marker for the temperature profile during processing. We find that the depth of the transformed layer agrees well with a simple 1-D calculation of heat flow following the laser pulse. As measured by the nanoindenter, we find that the surface martensite is softer than the as-rolled alloy. Multiple pulse processing at high fluences results in an increase in surface hardness, but at a depth much less than that of the martensite, suggesting an independent mechanism. 10 refs., 4 figs.

  17. Percutaneous excimer laser coronary angioplasty: development of technology and initial clinical results

    NASA Astrophysics Data System (ADS)

    Tcheng, James E.; Miller, James S.; Songer, Ronald W.; Golobic, Robert A.

    1992-08-01

    The development of laser systems suitable for vascular angioplasty is a multidisciplinary endeavor that includes development of the laser energy source, guidance modality, delivery catheter, and assessment of clinical applicability. In this paper we report on the design criteria of percutaneous coronary catheters and how these have guided development of the Spectranetics excimer laser angioplasty system. The Spectranetics CVX-300TM excimer laser angioplasty system was designed for safe application in the cardiac catheterization laboratory while maximizing system maintenance intervals. Recent improvements in catheter design and construction have been directed at optimizing target lesion acquisition and treatment. Lesion access and alignment have been facilitated through the use of optical fiber bundles with increased flexibility. Ablation efficiency has been improved by a combination of increased active fiber area and optimization of the radial location of the fiber array compared to the original devices. Engineered stiffness profiles have been improved and lubricous coatings incorporated to optimize force transmission and tactile feedback for the clinician. Initial clinical results appear favorable. In particular, excimer laser angioplasty appears to have an advantage in the treatment of complex coronary lesions such as diffuse coronary arterial disease, total occlusions, ostial stenoses, moderately calcified lesions, and vein graft disease. In these settings, improved procedural success rates and a lowered incidence of complications have been observed compared to conventional balloon PTCA angioplasty. Examples of complex coronary lesion cases as well as a summary of the data of the initial clinical results from the multicenter trial are also presented in this paper.

  18. Endovascular excimer laser atherectomy techniques to treat complex peripheral vascular disease: an orderly process.

    PubMed

    Garnic, J Daniel; Hurwitz, Andrew S

    2005-12-01

    Peripheral vascular disease represents the largest obstructive subsegment within the vascular system. Advances in equipment, techniques, biochemical treatments, and the influx of multiple specialties into this arena indicate a coming tidal wave of change to the standard treatment plan for patients with claudication and especially critical limb ischemia. Initial attempts in the 1980s to utilize the "laser" to treat peripheral vascular disease led to a clinical debacle: wavelengths and methods were not optimized; tissue heating was excessive, resulting in restenosis. Since then the "laser" has fallen from grace for endovascular treatment, although it has an infinite set of potential wavelengths, energy levels, and delivery methods. The xenon chloride, excimer laser, a pulsed 308-nm system, has overcome many of these early catastrophes. The long, ongoing success of this method of photoablating thrombus and plaque represents a true step forward in the endovascular treatment of occlusive disease. Although only a tool, the excimer laser provides a means to utilize electromagnetic energy instead of shearing mechanical force to resolve occlusions. With its active element at the tip, the excimer laser requires much less mechanical translation force to cross total occlusions, find the distal lumen, and thereby cause less plaque destabilization. In addition, removing the firm surface layer of plaque, decapping, and some of the plaque volume, debulking, exposes the softer subsegments of the plaque to balloon angioplasty. Utilizing this method, more complex lesions can be approached safely, with a high likelihood of successful revascularization and a low risk of potentially limb-threatening complication.

  19. Raman-shifting an ArF excimer laser to generate new lines for obtaining optical diagnostic based information in flow fields

    NASA Astrophysics Data System (ADS)

    Koker, Edmond B.

    1994-12-01

    of the gas near the focal region. Furthermore, since the Raman shifting process is polarization sensitive, it is necessary to have all of the laser energy in a single polarization. These factors were taken into consideration in the execution of the project. The implementation of the Raman shift was accomplished by focusing the 193 nm output of an ArF excimer laser (Lamda-Physik LPX 150) into a 1-meter long high pressure recirculating Raman cell filled with H2 gas. The laser system was modified in order to improve the mode quality of the pump beam to enhance the Raman shifting. To accomplish this feat, a prism beam expander and grating on the oscillator discharge provided wavelength tuning over the excimer gain profile. Furthermore, a triple-pass configuration, as opposed to unstable resonator optics, was employed in the operation of the amplifier cavity so that when the oscillator output radiation, focused by a 51-cm focal length fused silica lens through a 50 micron pinhole (serving as a spatial filter) and recollimated with a 25-cm focal length lens, was fed into the amplifier, it was injection locked, thereby providing tunable radiation with relatively low divergence.

  20. Raman-shifting an ArF excimer laser to generate new lines for obtaining optical diagnostic based information in flow fields

    NASA Technical Reports Server (NTRS)

    Koker, Edmond B.

    1994-01-01

    of the gas near the focal region. Furthermore, since the Raman shifting process is polarization sensitive, it is necessary to have all of the laser energy in a single polarization. These factors were taken into consideration in the execution of the project. The implementation of the Raman shift was accomplished by focusing the 193 nm output of an ArF excimer laser (Lamda-Physik LPX 150) into a 1-meter long high pressure recirculating Raman cell filled with H2 gas. The laser system was modified in order to improve the mode quality of the pump beam to enhance the Raman shifting. To accomplish this feat, a prism beam expander and grating on the oscillator discharge provided wavelength tuning over the excimer gain profile. Furthermore, a triple-pass configuration, as opposed to unstable resonator optics, was employed in the operation of the amplifier cavity so that when the oscillator output radiation, focused by a 51-cm focal length fused silica lens through a 50 micron pinhole (serving as a spatial filter) and recollimated with a 25-cm focal length lens, was fed into the amplifier, it was injection locked, thereby providing tunable radiation with relatively low divergence. The forward scattered radiation emanating from the impingement of the modified pump beam on the Raman cell was detected using an energy meter after the latter had been separated from it using a dispersing prism.

  1. Structural design of new alicyclic acrylate polymers with androstane moiety for 193-nm resist

    NASA Astrophysics Data System (ADS)

    Aoai, Toshiaki; Sato, Kenichiro; Kodama, Kunihiko; Kawabe, Yasumasa; Nakao, Hajime; Yagihara, Morio

    1999-06-01

    Synthesis of new alicyclic (meth)acrylate polymers containing androstane moieties, especially cholic acid derivatives, and their characteristics were investigated for 193nm single layer resists. Among the derivatives, a work of adhesion, Ohnishi and ring parameters were used as measures for the adhesion and the dry-etching resistance in this study. In the synthesis of the polymers, the use of 3- (beta) -methacryloyoxy-deoxycholic acid, which is the inverse configuration against the original 3-(alpha) -structure, was effective as a monomer, because the steric hindrance at 3- (alpha) -position degraded its polymerization ability. The polymers partially protected by acid labile groups showed a satisfactory adhesion, which was probably due to the hydrophilic hydroxyl group at the 12-position and the carboxyl group linked at the 17-position, and a good dry- etching resistance. On the lithographic imaging with these polymers, the reduction of the side reaction on the acid decomposition and also the control of the flexibility on the polymers largely affected their performance. THe adjustment of the Tg values of the polymers by the co-polymerization and the change of the polymer backbone from the methacrylate to acrylate structure performed well on imaging under 193nm exposure.

  2. Double-exposure materials for pitch division with 193nm lithography: requirements, results

    NASA Astrophysics Data System (ADS)

    Bristol, Robert; Shykind, David; Kim, Sungwon; Borodovsky, Yan; Schwartz, Evan; Turner, Courtney; Masson, Georgeta; Min, Ke; Esswein, Katherine; Blackwell, James M.; Suetin, Nikolay

    2009-03-01

    We present the results of both theoretical and experimental investigations of materials for application either as a reversible Contrast Enhancement Layer (rCEL) or a Two-Stage PAG. The purpose of these materials is to enable Litho- Litho-Etch (LLE) patterning for Pitch Division (PD) at the 16nm logic node (2013 Manufacturing). For the rCEL, we find from modeling using an E-M solver that such a material must posses a bleaching capability equivalent to a Dill A parameter of greater than 100. This is at least a factor of ten greater than that achieved so far at 193nm by any usable organic material we have tested. In the case of the Two-Stage PAG, analytical and lithographic modeling yields a usable material process window, in terms of reversibility and two-photon vs. one-photon acid production rates (branching ratio). One class of materials, based on the cycloadduct of a tethered pair of anthracenes, has shown promise under testing at 193nm in acetonitrile. Sufficient reversibility without acid production, enabled by near-UV exposure, has been achieved. Acid production as a function of dose shows a clear quadratic component, consistent with a branching ratio greater than 1. The experimental data also supports a acid contrast value of approximately 0.05 that could in principle be obtained with this molecule under a pitch division double-exposure scenario.

  3. Application of optical tweezers and excimer laser to study protoplast fusion

    NASA Astrophysics Data System (ADS)

    Kantawang, Titirat; Samipak, Sompid; Limtrakul, Jumras; Chattham, Nattaporn

    2015-07-01

    Protoplast fusion is a physical phenomenon that two protoplasts come in contact and fuse together. Doing so, it is possible to combine specific genes from one protoplast to another during fusion such as drought resistance and disease resistance. There are a few possible methods to induce protoplast fusion, for example, electrofusion and chemical fusion. In this study, chemical fusion was performed with laser applied as an external force to enhance rate of fusion and observed under a microscope. Optical tweezers (1064 nm with 100X objective N.A. 1.3) and excimer laser (308 nm LMU-40X-UVB objective) were set with a Nikon Ti-U inverted microscope. Samples were prepared by soaking in hypertonic solution in order to induce cell plasmolysis. Elodea Canadensis and Allium cepa plasmolysed leaves were cut and observed under microscope. Concentration of solution was varied to induce difference turgor pressures on protoplasts pushing at cell wall. Free protoplasts in solution were trapped by optical tweezers to study the effect of Polyethylene glycol (PEG) solution. PEG was diluted by Ca+ solution during the process to induced protoplast cell contact and fusion. Possibility of protoplast fusion by excimer laser was investigated and found possible. Here we report a novel tool for plant cell fusion using excimer laser. Plant growth after cell fusion is currently conducted.

  4. Study on the electromagnetic radiation characteristics of discharging excimer laser system

    NASA Astrophysics Data System (ADS)

    Zhao, Duliang; Liang, Xu; Fang, Xiaodong; Wang, Qingsheng

    2016-10-01

    Excimer laser in condition of high voltage, large current and fast discharge will produce strong electromagnetic pulse radiation and electromagnetic interference on the around electrical equipment. The research on characteristics and distribution of excimer laser electromagnetic radiation could provide important basis for electromagnetic shielding and suppressing electromagnetic interference, and further improving the electromagnetic compatibility of system. Firstly, electromagnetic radiation source is analyzed according to the working principle of excimer laser. The key test points of the electromagnetic radiation, hydrogen thyratron, main discharge circuit and laser outlet, are determined by the mechanical structure and the theory of electromagnetic radiation. Secondly, characteristics of electromagnetic field were tested using a near field probe on the key positions of the vertical direction at 20, 50, and 80 cm, respectively. The main radiation frequencies and the radiation field characteristics in the near field are obtained. The experimental results show that the main radiation frequencies distribute in 47, 65, and 130 MHz for electric field and the main radiation frequencies distribute in 34, 100, and 165 MHz for magnetic field. The intensity of electromagnetic field decreases rapidly with the increase of test distance. The higher the frequency increases, the faster the amplitude attenuate. Finally, several electromagnetic interference suppression measurement methods are proposed from the perspective of electromagnetic compatibility according to the test results.

  5. Focused excimer laser initiated, radio frequency sustained high pressure air plasmas

    SciTech Connect

    Giar, Ryan; Scharer, John

    2011-11-15

    Measurements and analysis of air breakdown processes and plasma production by focusing 193 nm, 300 mJ, 15 MW high power laser radiation inside a 6 cm diameter helical radio frequency (RF) coil are presented. Quantum resonant multi-photon ionization (REMPI) and collisional cascade laser ionization processes are exploited that have been shown to produce high-density (n{sub e} {approx} 7 x 10{sup 16}/cm{sup 3}) cylindrical seed plasmas at 760 Torr. Air breakdown in lower pressures (from 7-22 Torr), where REMPI is the dominant laser ionization process, is investigated using an UV 18 cm focal length lens, resulting in a laser flux of 5.5 GW/cm{sup 2} at the focal spot. The focused laser power absorption and associated shock wave produce seed plasmas for sustainment by the RF (5 kW incident power, 1.5 s) pulse. Measurements of the helical RF antenna load impedance in the inductive and capacitive coupling regimes are obtained by measuring the loaded antenna reflection coefficient. A 105 GHz interferometer is used to measure the plasma electron density and collision frequency. Spectroscopic measurements of the plasma and comparison with the SPECAIR code are made to determine translational, rotational, and vibrational neutral temperatures and the associated neutral gas temperature. From this and the associated measurement of the gas pressure the electron temperature is obtained. Experiments show that the laser-formed seed plasma allows RF sustainment at higher initial air pressures (up to 22 Torr) than that obtained via RF-only initiation (<18 Torr) by means of a 0.3 J UV laser pulse.

  6. Resonant Laser Ignition Study of HAN-HEHN Propellant Mixture (Preprint)

    DTIC Science & Technology

    2008-07-17

    threshold for pulsed, nonresonant laser experiments. d) Unconfined droplets were typically shattered and not completely ignited by thermal or optical...115 mJ) and 248 nm (250 mJ). An argon, fluorine, and helium mixture provided the ArF excimer emission at 193 nm. A krypton, fluorine, and helium ...V., and Shaw, B.D. (2002) Studies of HAN-based monopropellant droplet combustion, Combust. Sci. and Tech., 174, 71. 3.Carleton, F.B., Klein, N

  7. X-ray photoelectron spectroscopy study of excimer laser treated alumina films

    NASA Astrophysics Data System (ADS)

    Georgiev, D. G.; Kolev, K.; Laude, L. D.; Mednikarov, B.; Starbov, N.

    1998-01-01

    Amorphous alumina layers are deposited on a single crystal Si substrate by a e-gun evaporation technique. These films are then thermally annealed in oxygen to be crystallized and, further, irradiated with an excimer laser beam. At each stage of the film preparation, an x-ray photoelectron spectroscopy analysis is performed at the film surface and in depth, upon ion beam grinding. Results give evidence for the formation of an aluminosilicate upon thermal annealing of the film in oxygen. At the surface itself, this compound is observed to decompose upon excimer laser irradiation at energy densities exceeding 1.75 J/cm2, giving rise to free Si atoms and SiO2, however with complete disappearance of Al atoms. Model photochemical reactions are proposed to explain such transformations.

  8. Ocular drug permeation following experimental excimer laser treatment on the isolated pig eye.

    PubMed

    Scholz, Martina; Schründer, Stephan; Gärtner, Sven; Keipert, Sigrid; Hartmann, Christian; Pleyer, Uwe

    2002-04-01

    Excimer laser photorefractive keratectomy (PRK) is a well-established procedure which is frequently applied to correct myopia. Since structural alterations of the corneal epithelium occur after the treatment, a different drug permeation can be assumed. To investigate the effects of PRK on drug permeation, excimer laser ablations with varying depths were performed on isolated pig eyes. The permeation of lipophilic (diclofenac-sodium; D-Na) and hydrophilic (pilocarpine-hydrochloride; P-HCl model drugs were studied in vitro. Under these experimental conditions, P-HCl demonstrated a significant (p < 0.05) enhancement of permeation in relation to the ablation depth. In contrast, corneal epithelial thickness scarcely influenced the permeation rate of D-Na. Not until removing the entire epithelium did a significantly increased permeability occur, when compared to untreated cornea. These results suggest that PRK may significantly reduce the corneal barrier function and alter pharmacokinetics of topical medication.

  9. High power repetitive excimer lasers pumped by an all solid state magnetic exciter

    NASA Astrophysics Data System (ADS)

    Kobayashi, Osamu; Noda, Koji; Shimada, Tsutomu; Obara, Minoru

    1986-01-01

    In a high repetition rate excimer laser operation, the lifetime of the exciter is one of the most important problems. To attain a nearly endless lifetime of the excimer laser exciter, an all-solid-state exciter has been developed which consists of a high-voltage transformer switched by a silicon-controlled rectifier, producing a pulse whose energy and duration are 11.2 J and 8 microns, respectively, and a three-stage magnetic compressor. With a 1.4-ohm dummy load, output peak power, energy/pulse, and pulse duration were 100 MW, 5.2 J, and 100 ns, respectively. The electrical efficiency of the exciter was 47 percent. The energy loss of 6 J in the exciter was due both to the core loss and the transfer loss. It should be noted that the time jitter between the SCR gate input pulse and the output voltage pulse was less than 12 ns.

  10. Phosphorus doping of 4H SiC by liquid immersion excimer laser irradiation

    SciTech Connect

    Ikeda, Akihiro; Nishi, Koji; Ikenoue, Hiroshi; Asano, Tanemasa

    2013-02-04

    Phosphorus doping of 4H SiC is performed by KrF excimer laser irradiation of 4H SiC immersed in phosphoric acid. Phosphorus is incorporated to a depth of a few tens of nanometers at a concentration of over 10{sup 20}/cm{sup 3} without generating significant crystal defects. Formation of a pn junction diode with an ideality factor of 1.06 is demonstrated.

  11. Elaboration of excimer lasers dosimetry for bone and meniscus cutting and drilling using optical fibers

    NASA Astrophysics Data System (ADS)

    Jahn, Renate; Dressel, Martin; Neu, Walter; Jungbluth, Karl-Heinz

    1991-05-01

    In order to optimize bone and cartilage ablation, various excimer laser systems at 308 nm wavelength (pulse width 28 ns, 60 ns, 300 ns) and tapered fibers (core diameter 400 micrometers , 600 micrometers , 1000 micrometers ) were combined. By varying the major parameters such as fluence, pulselength, repetition rate, fiber diameter, medium, manner of application (drilling, cutting); analysis was made of the interaction of the excimer laser beam with different organic material (meniscus, bone tissue). More than 300 cuts and drillings have been realized with different parameters. The ablation rate mainly depends on fluence, repetition rate and pulse duration. The achieved ablation rate was 3 micrometers /pulse in bone. The drilling speed of the meniscus was 6 mm/s. The samples showed no carbonization at all, when being cut or drilled in liquid medium. This might be a breakthrough in fiber guided excimer laser surgery. From these and further experiments the authors obtained the dosimetry, which will be the basis for the elaboration of necessary operation guidelines for accident surgery.

  12. Expression of Epidermal c-Kit+ of Vitiligo Lesions Is Related to Responses to Excimer Laser

    PubMed Central

    Park, Oun Jae; Han, Ji Su; Lee, Sang Hyung; Park, Chan-Sik; Won, Chong Hyun; Lee, Mi Woo; Choi, Jee Ho

    2016-01-01

    Background The survival and growth of melanocytes are controlled by the binding of stem cell factor to its cell surface receptor c-kit+ (CD117). We have observed that c-kit+ melanocytes existed in some lesions of vitiligo, while Melan A+ cells were absent. Objective To verify possible relation between c-kit+ expression and treatment response in non-segmental vitiligo lesions Methods Skin biopsies were done from the center of the 47 lesions from the 47 patients with non-segmental vitiligo. Expression of c-kit+ and Melan A, and amounts of melanin in the epidermis were assessed in each lesion, and treatment responses to excimer laser were evaluated. Results Thirty-five of the 47 lesions (74.5%) had c-kit+ phenotypes. There was significant difference of c-kit staining value between good responders in 3 months of excimer laser treatment (average of 24 sessions) and the others. Conclusion c-Kit expression in vitiliginous epidermis may be related to better treatment responses to excimer laser. PMID:27489428

  13. The photodissociation dynamics of O2 at 193 nm: an O3PJ angular momentum polarization study.

    PubMed

    Brouard, M; Cireasa, R; Clark, A P; Quadrini, F; Vallance, C

    2006-12-21

    In the following paper we present translational anisotropy and angular momentum polarization data for O((3)P(1)) and O((3)P(2)) products of the photodissociation of molecular oxygen at 193 nm. The data were obtained using polarized laser photodissociation coupled with resonantly enhanced multiphoton ionization and velocity-map ion imaging. Under the jet-cooled conditions employed, absorption is believed to be dominated by excitation into the Herzberg continuum. The experimental data are compared with previous experiments and theoretical calculations at this and other wavelengths. Semi-classical calculations performed by Groenenboom and van Vroonhoven [J. Chem. Phys, 2002, 116, 1965] are used to estimate the alignment parameters arising from incoherent excitation and dissociation and these are shown to agree qualitatively well with the available experimental data. Following the work of Alexander et al. [J. Chem. Phys, 2003, 118, 10566], orientation and alignment parameters arising from coherent excitation and dissociation are modelled more approximately by estimating phase differences generated subsequent to dissociation via competing adiabatic pathways leading to the same asymptotic products. These calculations lend support to the view that large values of the coherent alignment moments, but small values of the corresponding orientation moments, could arise from coherent excitation of (and subsequent dissociation via) parallel and perpendicular components of the Herzberg I, II and III transitions.

  14. Inspection of advanced computational lithography logic reticles using a 193-nm inspection system

    NASA Astrophysics Data System (ADS)

    Yu, Ching-Fang; Lin, Mei-Chun; Lai, Mei-Tsu; Hsu, Luke T. H.; Chin, Angus; Lee, S. C.; Yen, Anthony; Wang, Jim; Chen, Ellison; Wu, David; Broadbent, William H.; Huang, William; Zhu, Zinggang

    2010-09-01

    We report inspection results of early 22-nm logic reticles designed with both conventional and computational lithography methods. Inspection is performed using a state-of-the-art 193-nm reticle inspection system in the reticleplane inspection mode (RPI) where both rule-based sensitivity control (RSC) and a newer modelbased sensitivity control (MSC) method are tested. The evaluation includes defect detection performance using several special test reticles designed with both conventional and computational lithography methods; the reticles contain a variety of programmed critical defects which are measured based on wafer print impact. Also included are inspection results from several full-field product reticles designed with both conventional and computational lithography methods to determine if low nuisance-defect counts can be achieved. These early reticles are largely single-die and all inspections are performed in the die-to-database inspection mode only.

  15. Development of an inorganic nanoparticle photoresist for EUV, e-beam, and 193nm lithography

    NASA Astrophysics Data System (ADS)

    Krysak, Marie; Trikeriotis, Markos; Schwartz, Evan; Lafferty, Neal; Xie, Peng; Smith, Bruce; Zimmerman, Paul; Montgomery, Warren; Giannelis, Emmanuel; Ober, Christopher K.

    2011-04-01

    We have developed a transparent, high refractive index inorganic photoresist with significantly higher etch resistance than even the most robust polymeric resist. As feature sizes continue to decrease, film thickness must be reduced in order to prevent pattern collapse. Normally thinner films prevent sufficient pattern transfer during the etch process, creating the need for a hardmask, thus increasing production cost. Compared to PHOST, we have shown over 10 times better etch resistance. Organic photo-crosslinkable ligands have been attached to a hafnium oxide nanoparticle core to create an imageable photoresist. This resist has shown superior resolution with both E-beam and 193 nm lithography, producing sub-50 nm patterns. In addition to improved etch resistance, the inorganic photoresist exhibits a high refractive index, increasing the depth of focus (DOF). The nanoparticle size of ~ 1-2 nm has the potential to reduce line edge roughness (LER).

  16. Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy.

    PubMed

    Barnes, Bryan M; Sohn, Martin Y; Goasmat, Francois; Zhou, Hui; Vladár, András E; Silver, Richard M; Arceo, Abraham

    2013-11-04

    Optical microscopy is sensitive both to arrays of nanoscale features and to their imperfections. Optimizing scattered electromagnetic field intensities from deep sub-wavelength nanometer scale structures represents an important element of optical metrology. Current, well-established optical methods used to identify defects in semiconductor patterning are in jeopardy by upcoming sub-20 nm device dimensions. A novel volumetric analysis for processing focus-resolved images of defects is presented using simulated and experimental examples. This new method allows defects as narrow as (16 ± 2) nm (k = 1) to be revealed using 193 nm light with focus and illumination conditions optimized for three-dimensional data analysis. Quantitative metrics to compare two-dimensional and three-dimensional imaging indicate possible fourfold improvements in sensitivity using these methods.

  17. Depth-of-focus (DoF) analysis of a 193nm superlens imaging structure.

    PubMed

    Shi, Zhong; Kochergin, Vladimir; Wang, Fei

    2009-10-26

    We present a design of a 193 nm superlens imaging structure to enable the printing of 20 nm features. Optical image simulations indicate that the 20 nm resolution is feasible for both the periodic grating feature and the two-slit feature. Nominal depth-of-focus (DoF) position for both features is identified through the image contrast calculations. Simulations show that the two features have a common nominal dose at the nominal DoF to resolve 20 nm critical dimension when a suitable dielectric material is placed between mask and superlens layer. A DoF of micro8 nm is shown to be obtainable for the 20 nm half-pitch grating feature while the respective DoF for the two-slit feature is less than 8 nm which potentially can be enhanced by employing existing lithographic resolution enhancement techniques.

  18. Carbon Nanotube Scanning Probe for Surface Profiling of DUV and 193 nm Photoresist Pattern

    NASA Technical Reports Server (NTRS)

    Nguyen, Cattien V.; Stevens, Ramsey M. D.; Barber, Jabulani; Han, Jie; Meyyappan, M.; Sanchez, Martha I.; Larson, Carl; Hinsberg, William D.; Arnold, Jim (Technical Monitor)

    2001-01-01

    The continual scaling down of semiconductors to 100 nm and below necessitates a characterization technique to resolve high aspect ratio features in the nanoscale regime. This paper reports the use of atomic force microscope coupled with high aspect ratio multi-walled carbon nanotube scanning probe tip for the purpose of imaging surface profile of photoresists. Multi-walled carbon nanotube tips used in this work are 5-10 nm in diameter and about a micron long. Their exceptional mechanical strength and ability to reversibly buckle enable to resolve steep, deep nanometer-scale features. Images of photoresist patterns generated by 257 nm interference lithography as well as 193 nm lithography are presented to demonstrate multi-walled carbon nanotube scanning probe tip for applications in metrology.

  19. The development and progress of XeCl Excimer laser system

    NASA Astrophysics Data System (ADS)

    Zhang, Yongsheng; Ma, Lianying; Wang, Dahui; Zhao, Xueqing; Zhu, Yongxiang; Hu, Yun; Qian, Hang; Shao, Bibo; Yi, Aiping; Liu, Jingru

    2015-05-01

    A large angularly multiplexed XeCl Excimer laser system is under development at the Northwest Institute of Nuclear Technology (NINT). It is designed to explore the technical issues of uniform and controllable target illumination. Short wavelength, uniform and controllable target illumination is the fundamental requirement of high energy density physics research using large laser facility. With broadband, extended light source and multi-beam overlapping techniques, rare gas halide Excimer laser facility will provide uniform target illumination theoretically. Angular multiplexing and image relay techniques are briefly reviewed and some of the limitations are examined to put it more practical. The system consists of a commercial oscillator front end, three gas discharge amplifiers, two electron beam pumped amplifiers and the optics required to relay, encode and decode the laser beam. An 18 lens array targeting optics direct and focus the laser in the vacuum target chamber. The system is operational and currently undergoing tests. The total 18 beams output energy is more than 100J and the pulse width is 7ns (FWHM), the intensities on the target will exceed 1013W/cm2. The aberration of off-axis imaging optics at main amplifier should be minimized to improve the final image quality at the target. Automatic computer controlled alignment of the whole system is vital to efficiency and stability of the laser system, an array of automatic alignment model is under test and will be incorporated in the system soon.

  20. Excimer laser phototherapy for the dissolution of vascular obstruction

    DOEpatents

    Gruen, D.M.; Young, C.E.; Pellin, M.J.

    1984-01-09

    Removal of abnormal human tissue with reduced thermal damage is achieved by selecting a laser having a wavelength in the order of 290 to 400 nm, orienting a laser-transmitting glass member toward the abnormal tissue and directing the laser through the glass member at power densities, pulse rates, and times sufficient to cause multiphoton absorption and bond breaking by Coulomb repulsion rather than thermal destruction. 2 figures.

  1. Excimer laser phototherapy for the dissolution of abnormal growth

    DOEpatents

    Gruen, Dieter M.; Young, Charles E.; Pellin, Michael J.

    1987-01-01

    Removal of abnormal human tissue with reduced thermal damage is achieved by selecting a laser having a wavelength in the order of 290-400 nm, orienting a laser-transmitting glass member toward the abnormal tissue and directing the laser through the glass member at power densities, pulse rates, and times sufficient to cause multiphoton absorption and bond breaking by Coulomb repulsion rather than thermal destruction. The glass member may include a laser beam concentrator provided by a lens or cone at the tissue-treatment end to increase the beam energy per unit area and reduce the treatment area.

  2. Excimer laser phototherapy for the dissolution of abnormal growth

    DOEpatents

    Gruen, D.M.; Young, C.E.; Pellin, M.J.

    1985-02-19

    Removal of abnormal human tissue with reduced thermal damage is achieved by selecting a laser having a wavelength in the order of 290 to 400 nm, orienting a laser-transmitting glass member toward the abnormal tissue and directing the laser through the glass member at power densities, pulse rates, and times sufficient to cause multiphoton absorption and bond breaking by Coulomb repulsion rather than thermal destruction. The glass member may include a laser beam concentrator provided by a lens or cone at the tissue-treatment end to increase the beam energy per unit area and reduce the treatment area. 6 figs.

  3. Green synthesis of selenium nanoparticles by excimer pulsed laser ablation in water

    NASA Astrophysics Data System (ADS)

    Van Overschelde, O.; Guisbiers, G.; Snyders, R.

    2013-10-01

    Pure selenium nanoparticles were successfully synthesized by Liquid Phase - Pulsed Laser Ablation (LP-PLA) in de-ionized water. Excimer laser (248 nm) operating at low fluence (F ˜ 1 J/cm2) was used to generate colloidal solutions of selenium nanoparticles. The obtained selenium nanoparticles were characterized by UV-visible spectroscopy, Raman spectroscopy, Dynamic Light Scattering, and Transmission Electron Microscopy. We describe the multi-modal size distributions generated and use the centrifugation method to isolate the smallest nanoparticles (˜60 nm in diameter).

  4. Experimental and clinical evaluation of a spectroscopy system for fluorescence-guided excimer laser angioplasty

    NASA Astrophysics Data System (ADS)

    Morguet, Andreas J.; Gabriel, Ruth E.; Buchwald, Arnd B.

    1996-12-01

    This study evaluated a single-laser approach for simultaneous ablation and fluorescence excitation for spectroscopic guidance of laser angioplasty. A spectroscopy system was developed and coupled to a clinical XeCl excimer laser. Ablation of 162 human aortic samples in saline and blood with 45 mJ/mm2 per pulse yielded 676 fluorescence spectra validated histologically. Five types of spectra could be differentiated: atheroma, fibrous plaque, calcified lesion in saline, normal media and calcified lesion in blood. Discriminant analysis prospectively classified 576 validation spectra with a sensitivity between 83.5 and 100 percent and a specificity between 96.8 and 100 percent. Subsequently, the equipment was used in 16 patients for angioplasty of 18 coronary stenoses applying 500 to 1725 pulses with 45 to 60 mJ/mm2 under saline flushing. A total of 783 spectra were recorded and validated by intracoronary ultrasound. Except for the media spectrum, all types of spectra were observed in vivo, too. The predominant sonographic category also prevailed in spectroscopy. In conclusion, using an excimer laser for angioplasty allows combining ablation and fluorescence excitation without a diagnostic laser. Principal types of atherosclerotic lesions and the media can be differentiated spectroscopically with this approach.

  5. Surface modification of polytetrafluoroethylene by excimer-laser radiation

    SciTech Connect

    Nishii, M.; Sugimoto, S.; Shimizu, Y.; Suzuki, N.; Kewanishi, S.; Nagese, T.; Endo, M.; Eguchi, Y.

    1993-12-31

    The adhesive strength of polytetrafluoroethylene (PTFE) films was enhanced remarkably by KrF-laser irradiation in air when a small amount of aromatic polymers such as aromatic polyester, polyetheretherketone and polyimide were blended with PTFE. From the surface analysis of the laser-irradiated PTFE by an X-ray photoelectron spectroscopy and a scanning electron microscopy, it was found that the enhancement in the adhesive properties was attributable to both the chemical effect owing to the formation of the polar groups such as carbonyl group and ethylene linkage and the physical one owing to the formation of the uneveness by the KrF-laser irradiation.

  6. Finite element simulation for ultraviolet excimer laser processing of patterned Si/SiGe/Si(100) heterostructures

    SciTech Connect

    Conde, J. C.; Chiussi, S.; Gontad, F.; Gonzalez, P.; Martin, E.; Serra, C.

    2010-07-05

    Ultraviolet (UV) Excimer laser assisted processing is an alternative strategy for producing patterned silicon germanium heterostructures. We numerically analyzed the effects caused by pulsed 193 Excimer laser radiation impinging on patterned amorphous hydrogenated silicon (a-Si:H) and germanium (a-Ge:H) bilayers deposited on a crystalline silicon substrate [Si(100)]. The proposed two dimensional axisymmetric numerical model allowed us to estimate the temperature and concentration gradients caused by the laser induced rapid melting and solidification processes. Energy density dependence of maximum melting depth and melting time evolution as well as three dimensional temperature and element distribution have been simulated and compared with experimentally obtained results.

  7. XeCl excimer laser with new prism resonator configurations and its performance characteristics

    SciTech Connect

    Benerji, N. S. E-mail: bsingh@rrcat.gov.in; Singh, A.; Varshnay, N.; Singh, Bijendra E-mail: bsingh@rrcat.gov.in

    2015-07-15

    New resonator cavity configurations, namely, the prism resonator and unstable prism resonator, are demonstrated for the first time in an excimer (XeCl) laser with interesting and novel results. High misalignment tolerance ∼50 mrad is achieved with considerably reduced beam divergence of less than ∼1 mrad without reduction in output power capabilities of the laser. The misalignment tolerance of ∼50 mrad is a dramatic improvement of ∼25 times compared to ∼2 mrad normally observed in standard excimer laser with plane-plane cavity. Increase in depth of focus from 3 mm to 5.5 mm was also achieved in case of prism resonator configuration with an improvement of about 60%. Unstable prism resonator configuration is demonstrated here in this paper with further reduction in beam divergence to about 0.5 mrad using plano-convex lens as output coupler. The misalignment tolerance in case of unstable prism resonator was retained at about 30 mrad which is a high value compared to standard unstable resonators. The output beam spot was completely filled with flat-top profile with prism resonator configurations, which is desired for various material processing applications. Focusing properties and beam divergence in case of prism resonator have been investigated using SEM (scanning electron microscope) images. SEM images of the focused spot size (∼20 μm holes) on metal sheet indicate beam divergence of about 0.05 mrad which is about 1.5 times diffraction limit. Energy contained in this angle is thus sufficient for micro-machining applications. Clean and sharp edges of the micro-holes show high pointing stability with multiple shot exposures. Such characteristics of the excimer laser system will be extremely useful in micro-machining and other field applications.

  8. Silsesquioxane-based 193 nm bilayer resists: characterization and lithographic evaluation

    NASA Astrophysics Data System (ADS)

    Ito, Hiroshi; Truong, Hoa D.; Burns, Sean D.; Pfeiffer, Dirk; Huang, Wu-Song; Khojasteh, Mahmoud M.; Varanasi, P. Rao; Lercel, Mike

    2005-05-01

    Polysilsesquioxane-based 193 nm positive bilayer resists are described. In this design Si for etch resistance is placed in every repeat unit and acid-labile protected and acidic groups (and polar units) are in the side chain, allowing to incorporate each lithographically critical functionality in sufficient quantity. Fluoroalcohol is employed as an acid group instead of carboxylic acid because of its more attractive dissolution properties. Polymers were carefully analyzed by 19F, 13C, and 29Si NMR to determine composition and to quantify residual acetyl, silanol, and Q/T. Hydrogen-bonding between tertiary ester and fluoroalcohol in the polysilsesquioxanes was investigated by FT-IR and the effect of lactone incorporation on the thermal deprotection temperature elucidated. In order to better understand the dissolution behavior of exposed resist films, the silsesquioxane resist polymers were partially (ca. 30%) and fully deprotected in solution with acid and their dissolution kinetics investigated by using a quartz crystal microbalance (QCM). It has been found that the exposed areas of the silsesquioxane resists can have a very fast dissolution rate (Rmax) of >20,000 A/sec (or even >100,000 A/sec). Heating the fully deprotected model polymers to 150°C did not reduce the dissolution rate much, suggesting thermal condensation of silanol end groups is insignificant. Model deprotected polymers containing triphenylsulfonium nonaflate were exposed to 254 nm radiation, baked, and subjected to QCM measurements in order to determine whether or not acid-catalyzed silanol condensation would reduce the dissolution rate. A combination of high dose and high temperature bake resulted in significant reduction of the dissolution rate in the silsesquioxane polymer containing a small trifluoroalcohol. However, the dissolution behavior of the polymer bearing a bulky norbornene hexafluoroalcohol was unaffected by exposure and bake. Chemical and development contrast curves were generated

  9. Characteristics of XeCl excimer-laser annealed insulator

    SciTech Connect

    Jang, K.H.; Choi, H.S.; Jun, J.H.; Yoo, J.S.; Han, M.K.

    1996-12-31

    Laser-induced crystallization method has been successfully utilized to fabricate the low-temperature polysilicon (poly-Si) films for the application to the thin film transistors (TFTs). The laser annealing effects on the TEOS (Tetra-Ethyl-Ortho-Silicate) oxide of MOS (Al/TEOS/n{sup +} Silicon) structures was investigated with different initial oxide conditions, such as breakdown field. The breakdown field increased up to the 170 mJ/cm{sup 2} with increasing laser energy density and decreased at 220 mJ/cm{sup 2}. It is considered that the increase of breakdown field is originated from the restore of strains which exist mainly at the metal/oxide interface.

  10. Optimization of electron-beam pumped excimer laser

    NASA Astrophysics Data System (ADS)

    Lowum, T. F.; Swecker, J. L.

    The output energy of an electron-beam pumped xenon flouride laser has been enhanced by optimizing certain electron-gun and gas-mix parameters. The optimized e-gun parameters include anode-cathode spacing, magnetic field strength, and cathode voltage. The optimized laser gas parameters include NF3 concentration, Xe concentration, and total pressure. The shortest anode-cathode spacing (9 cm), the strongest magnetic guide field (1600 Gauss), and the highest cathode voltage (375 kV) gave the highest laser output. The optimum gas concentrations were 0.05 percent NF3, 0.3 percent Xe, with Ne added to bring the total gas pressure to 60 psia. The energy degraded by 2 percent per shot with this gas mix.

  11. Excimer laser angioplasty in acute myocardial infarction (the CARMEL multicenter trial).

    PubMed

    Topaz, On; Ebersole, Douglas; Das, Tony; Alderman, Edwin L; Madyoon, Hooman; Vora, Kishor; Baker, John D; Hilton, David; Dahm, Johannes B

    2004-03-15

    Patients with acute myocardial infarction (AMI) with thrombus-laden lesions constitute a revascularization challenge. Thrombus and atherosclerotic plaque absorb laser energy; thus, we studied the safety and efficacy of excimer laser in AMI. In a multicenter trial, 151 patients with AMI underwent excimer laser angioplasty. Baseline left ventricular ejection fraction was 44 +/- 13%, and 13% of patients were in cardiogenic shock. A saphenous vein graft was the target vessel in 21%. Quantitative coronary angiography and statistical analysis were performed by independent core laboratories. A 95% device success, 97% angiographic success, and 91% overall procedural success rate were recorded. Maximal laser gain was achieved in lesions with extensive thrombus burden (p <0.03 vs small burden). Thrombolysis In Myocardial Infarction (TIMI) trial flow increased significantly by laser: 1.2 +/- 1.1 to 2.8 +/- 0.5 (p <0.001), reaching a final 3.0 +/- 0.2 (p <0.001 vs baseline). Minimal luminal diameter increased by laser from 0.5 +/- 0.5 to 1.6 +/- 0.5 mm (mean +/- SD, p <0.001), followed by 2.7 +/- 0.6 mm after stenting (p <0.001 vs baseline and vs after laser). Laser decreased target stenosis from 83 +/- 17% to 52 +/- 15% (mean +/- SD, p <0.001 vs baseline), followed by 20 +/- 16% after stenting (p <0.001 vs baseline and vs after laser). Six patients (4%) died, each presented with cardiogenic shock. Complications included perforation (0.6%), dissection (5% major, 3% minor), acute closure (0.6%), distal embolization (2%), and bleeding (3%). In a multivariant regression model, absence of cardiogenic shock was a significant factor affecting procedural success. Thus, in the setting of AMI, gaining maximal thrombus dissolution in lesions with extensive thrombus burden, combined with a considerable increase in minimal luminal diameter and restoration of anterograde TIMI flow, support successful debulking by excimer laser. The presence of thrombus does not adversely affect procedural

  12. Surface modification of dental tissues by KrF excimer laser radiation

    NASA Astrophysics Data System (ADS)

    Sivakumar, M.; Oliveira, V.; Vilar, R.

    2007-02-01

    Laser treatment is a promising technique for dental applications such as caries removal, dental hypersensitivity reduction and improvement of the bond strength between dentin and restoration materials. In this study the topographic and morphological changes induced in enamel and dentin surfaces by treating with KrF excimer laser radiation were studied as a function of the number of laser pulses and radiation fluence by scanning electron microscopy and optical profilometry. For enamel, independently of the fluence used, material removal occurs preferentially at the prisms sheaths, leading to the formation of surface pits of a few micrometers. For dentin, a cone-like topography develops when the tubules are approximately parallel to the laser beam direction and the radiation fluence is within the range 0.5 to 1.5 J/cm2. For higher fluences, the treated surfaces are flat and covered with a layer of re-solidified materials.

  13. Coloring linens with excimer lasers to simulate the body image of the Turin Shroud

    NASA Astrophysics Data System (ADS)

    Baldacchini, Giuseppe; di Lazzaro, Paolo; Murra, Daniele; Fanti, Giulio

    2008-03-01

    The body image of the Turin Shroud has not yet been explained by traditional science; so a great interest in a possible mechanism of image formation still exists. We present preliminary results of excimer laser irradiation (wavelength of 308 nm) of a raw linen fabric and of a linen cloth. The permanent coloration of both linens is a threshold effect of the laser beam intensity, and it can be achieved only in a narrow range of irradiation parameters, which are strongly dependent on the pulse width and time sequence of laser shots. We also obtained the first direct evidence of latent images impressed on linen that appear in a relatively long period (one year) after laser irradiation that at first did not generate a clear image. The results are compared with the characteristics of the Turin Shroud, reflecting the possibility that a burst of directional ultraviolet radiation may have played a role in the formation of the Shroud image.

  14. Laser-induced damage measurements on phase-unifying mirrors for XeF excimer laser cavities

    NASA Astrophysics Data System (ADS)

    Protopapa, Maria Lucia; Perrone, Maria Rita; Piegari, Angela M.; Andre, Bernard; Ravel, Guillaume

    2004-02-01

    Mirrors with a graded reflectance profile have been used for many years in unstable cavities for improving the optical quality of the laser output beams. All the variable reflectivity mirrors are realized with multilayer-coatings containing one or more profiled layers inside the stack. They generally exhibit high reflectance in the central area and very low reflectance in the external area. In particular, phase-unifying (PU) mirrors are graded mirrors properly designed in order to obtain a low wave-front distortion in the transmitted laser beam. In this paper, the laser damage resistance properties of a PU mirror designed for XeF excimer lasers (351 nm) have been studied. The laser-induced damage threshold has been measured by a XeF laser on the high and low reflectivity areas. A correlation between the damage threshold values and the standing wave electric field profile, which settles inside the two coating structures during laser irradiation, has been found.

  15. Mechanisms involved in HBr and Ar cure plasma treatments applied to 193 nm photoresists

    SciTech Connect

    Pargon, E.; Menguelti, K.; Martin, M.; Bazin, A.; Joubert, O.; Lill, T.

    2009-05-01

    In this article, we have performed detailed investigations of the 193 nm photoresist transformations after exposure to the so-called HBr and Ar plasma cure treatments using various characterization techniques (x-ray photoelectron spectroscopy, Fourier transformed infrared, Raman analyses, and ellipsometry). By using windows with different cutoff wavelengths patched on the photoresist film, the role of the plasma vacuum ultraviolet (VUV) light on the resist modifications is clearly outlined and distinguished from the role of radicals and ions from the plasma. The analyses reveal that both plasma cure treatments induce severe surface and bulk chemical modifications of the resist films. The synergistic effects of low energetic ion bombardment and VUV plasma light lead to surface graphitization or cross-linking (on the order of 10 nm), while the plasma VUV light (110-210 nm) is clearly identified as being responsible for ester and lactone group removal from the resist bulk. As the resist modification depth depends strongly on the wavelength penetration into the material, it is found that HBr plasma cure that emits near 160-170 nm can chemically modify the photoresist through its entire thickness (240 nm), while the impact of Ar plasmas emitting near 100 nm is more limited. In the case of HBr cure treatment, Raman and ellipsometry analyses reveal the formation of sp{sup 2} carbon atoms in the resist bulk, certainly thanks to hydrogen diffusion through the resist film assisted by the VUV plasma light.

  16. Top-coatless 193nm positive-tone development immersion resist for logic application

    NASA Astrophysics Data System (ADS)

    Liu, Lian Cong; Yeh, Tsung Ju; Lin, Yeh-Sheng; Huang, Yu Chin; Kuo, Chien Wen; Huang, Wen Liang; Lin, Chia Hung; Yu, Chun Chi; Hsu, Ray; Wan, I.-Yuan; Lin, Jeff; Im, Kwang-Hwyi; Lim, Hae Jin; Jeon, Hyun K.; Suzuki, Yasuhiro; Xu, Cheng Bai

    2015-03-01

    In this paper, we summarize our development efforts for a top-coatless 193nm immersion positive tone development (PTD) contact hole (C/H) resist with improved litho and defect performances for logic application specifically with an advance node. The ultimate performance goal was to improve the depth of focus (DoF) margin, mask error enhancement factor (MEEF), critical dimension uniformity (CDU), contact edge roughness (CER), and defect performance. Also, the through pitch CD difference was supposed to be comparable to the previous control resist. Effects of polymer and PAG properties have been evaluated for this purpose. The material properties focused in the evaluation study were polymer activation energy (Ea), polymer solubility differentiated by polymerization process types, and diffusion length (DL) and acidity (pKa) of photoacid generator (PAG). Additionally, the impact of post exposure bake (PEB) temperature was investigated for process condition optimization. As a result of this study, a new resist formulation to satisfy all litho and defect performance was developed and production yield was further improved.

  17. Photodissociation of the Propargyl (C3D3) Radicals at 248 nm and 193 nm

    SciTech Connect

    Neumark., D.M.; Crider, P.E.; Castiglioni, L.; Kautzman, K.K.

    2009-01-21

    The photodissociation of perdeuterated propargyl (D{sub 2}CCCD) and propynyl (D{sub 3}CCC) radicals was investigated using fast beam photofragment translational spectroscopy. Radicals were produced from their respective anions by photodetachment at 540 nm and 450 nm (below and above the electron affinity of propynyl). The radicals were then photodissociated by 248 nm or 193 nm light. The recoiling photofragments were detected in coincidence with a time- and position-sensitive detector. Three channels were observed: D{sub 2} loss, CD + C{sub 2}D{sub 2}, and CD{sub 3} + C{sub 2}. Obervation of the D loss channel was incompatible with this experiment and was not attempted. Our translational energy distributions for D{sub 2} loss peaked at nonzero translational energy, consistent with ground state dissociation over small (< 1 eV) exit barriers with respect to separated products. Translational energy distributions for the two heavy channels peaked near zero kinetic energy, indicating dissociation on the ground state in the absence of exit barriers.

  18. 193-nm radiation durability study of MoSi binary mask and resulting lithographic performance

    NASA Astrophysics Data System (ADS)

    Servin, Isabelle; Belledent, Jérôme; Pain, Laurent; Connolly, Brid; Sczyrba, Martin; Lamantia, Matt

    2011-05-01

    Dimensions on mask continue to shrink to keep up with the ITRS roadmap. This has implications on the material of choice for the blanks. For example, the new binary OMOG stack (Opaque MOSi on Glass) was successfully introduced to meet the mask specifications at the 32nm technology node. Obviously 193-nm optical lithography will be further used in production at even higher NA and lower k1 emphasizing, for example, the impact on wafer of any electromagnetic field migration effects. Indeed, long term radiation damage inducing CD growth and consequently, device yield loss, has already been reported [1, 2]. This mechanism, known as Electric Field induced Migration of chrome (EMF) often shortens the mask's lifetime. Here, a study was conducted to investigate the impact of intensive ArF scanner exposure both on final wafer and mask performances. The Si printed wafers measured with top-down CD-SEM were characterized with respect to CD uniformity, linearity, Sub Resolution Assist Feature (SRAF) printability through process window, MEEF, DOF, and OPC accuracy. The data was also correlated to advanced mask inspection results (e.g. AIMSTM) taken at the same location. More precisely, this work follows a preliminary study [1] which pointed out that OMOG is less sensitive to radiation than standard COG (Chrome On Glass). And, in this paper, we report on results obtained at higher energy to determine the ultimate lifetime of OMOG masks.

  19. The stability of allyl radicals following the photodissociation of allyl iodide at 193 nm.

    SciTech Connect

    Fan, H.; Pratt, S. T.; Chemistry

    2006-01-01

    The photodissociation of allyl iodide (C{sub 3}H{sub 5}I) at 193 nm was investigated by using a combination of vacuum-ultraviolet photoionization of the allyl radical, resonant multiphoton ionization of the iodine atoms, and velocity map imaging. The data provide insight into the primary C-I bond fission process and into the dissociative ionization of the allyl radical to produce C{sub 3}H{sup 3+}. The experimental results are consistent with the earlier results of Szpunar et al. [J. Chem. Phys. 119, 5078 (2003)], in that some allyl radicals with internal energies higher than the secondary dissociation barrier are found to be stable. This stability results from the partitioning of available energy between the rotational and vibrational degrees of freedom of the radical, the effects of a centrifugal barrier along the reaction coordinate, and the effects of the kinetic shift in the secondary dissociation of the allyl radical. The present results suggest that the primary dissociation of allyl iodide to allyl radicals plus I*({sup 2}P{sub 1/2}) is more important than previously suspected.

  20. CD-SEM measurement line-edge roughness test patterns for 193-nm lithography

    NASA Astrophysics Data System (ADS)

    Bunday, Benjamin D.; Bishop, Michael; Villarrubia, John S.; Vladar, Andras E.

    2003-05-01

    The measurement of line-edge roughness (LER) has recently become a major topic of concern in the litho-metrology community and the semiconductor industry as a whole, as addressed in the 2001 ITRS roadmap. The Advanced Metrology Advisory Group (AMAG, a council composed of the chief CD-metrologists from the International SEMATECH consortium's Member Companies and from the National Institute of Standards and Technology, NIST) has begun a project to investigate this issue and to direct the CD-SEM supplier community towards a semiconductor industry-backed solution for implementation. The AMAG group has designed and built a 193 nm reticle that includes structures implementing a number of schemes to intentionally cause line edge roughness of various spatial frequencies and amplitudes. The lithography of these structures is in itself of interest to the litho-metrology community and will be discussed here. Measurements on different CD-SEMs of major suppliers will be used to comparatively demonstrate the current state of LER measurement. These measurements are compared to roughness determined off-line by analysis of top-down images from these tools. While no official standard measurement algorithm or definition of LER measurement exists, definitions used in this work are presented and compared in use. Repeatability of the measurements and factors affecting their accuracy will be explored, as well as how CD-SEM parameters can effect the measurements.

  1. Tuning and simulating a 193-nm resist for 2D applications

    NASA Astrophysics Data System (ADS)

    Howard, William B.; Wiaux, Vincent; Ercken, Monique; Bui, Bang; Byers, Jeff D.; Pochkowski, Mike

    2002-07-01

    For some applications, the usefulness of lithography simulation results depends strongly on the matching between experimental conditions and the simulation input parameters. If this matching is optimized and other sources of error are minimized, then the lithography model can be used to explain printed wafer experimental results. Further, simulation can be useful in predicting the results or in choosing the correct set of experiments. In this paper, PROLITH and ProDATA AutoTune were used to systematically vary simulation input parameters to match measured results on printed wafers used in a 193 nm process. The validity of the simulation parameters was then checked using 3D simulation compared to 2D top-down SEM images. The quality of matching was evaluated using the 1D metrics of average gate CD and Line End Shortening (LES). To ensure the most accurate simulation, a new approach was taken to create a compound mask from GDSII contextual information surrounding an accurate SEM image of the reticle region of interest. Corrections were made to account for all metrology offsets.

  2. Pulsed Excimer Laser Processing for Cost-Effective Solar Cells

    NASA Technical Reports Server (NTRS)

    Wong, D.

    1985-01-01

    Residual lattice damage by 5 keV ion implantation and surface flaws induced by wafer cleaning are proven to affect the V sub oc more adversely for laser annealed cells than conventional thermal diffusion. However, an alternative, molecular implantation of molecular species holds potential. The first experimental results are encouraging. The lack of a commercially available mass analyzed implantation with low energy, high fluence ions is constraining.

  3. Amorphous and excimer laser annealed SiC films for TFT fabrication

    NASA Astrophysics Data System (ADS)

    García, B.; Estrada, M.; Albertin, K. F.; Carreño, M. N. P.; Pereyra, I.; Resendiz, L.

    2006-02-01

    The characteristics of hydrogenated amorphous silicon carbide films prepared by PECVD and crystallized by KrF UV excimer laser annealing (ELA), for different annealing conditions, are studied to determine particulate size, surface roughness, band gap and resistivity in order to apply them to TFTs fabrication. Raman spectra for ELA SiC films indicate the presence of 6H-SiC polytype together with Si and C crystallites. We also describe the fabrication process to obtain a-Si 1- xC x:H TFTs and ELA TFTs on the same wafer, comparing their output and transfer characteristics.

  4. Tailoring immobilization of immunoglobulin by excimer laser for biosensor applications.

    PubMed

    Sima, Felix; Axente, Emanuel; Ristoscu, Carmen; Mihailescu, Ion N; Kononenko, Taras V; Nagovitsin, Ilya A; Chudinova, Galina; Konov, Vitaly I; Socol, Marcela; Enculescu, Ionut; Sima, Livia E; Petrescu, Stefana M

    2011-02-01

    The sheltered transfer and immobilization of rabbit anti-human antiserum immunoglobulin G (IgG) by matrix-assisted pulsed laser evaporation (MAPLE) are reported. The iced targets submitted to laser irradiation consisted of 0.2-2 mg/mL IgG blended or not with lipid (L-α-phosphatidylcholine dipalmitoyl) dissolved in distilled water-based saline buffer. Thin IgG coatings were obtained at room temperature onto glass, fused silica, or silicon substrates. Ten thousand subsequent laser pulses of 0.33, 0.5, or 0.67 J/cm(2) fluence were applied for the synthesis of each sample. Morphology and composition of the thin films were studied by optical, scanning, and atomic force microscopy and Fourier transformed infrared spectrometry. Optical labeling methods such as spectrofluorimetry and fluorescence microscopy were selected to verify the biosensor transduction principle because of their high sensitivity for detecting low amounts of antigen (IgG). Protein immobilization to the substrate surface was demonstrated for all obtained structures after immersion in the donkey anti-rabbit secondary antibody solution. The IgG transfer and immobilization onto substrates were improved by addition of lipid to MAPLE solutions.

  5. Photo-triggering and secondary electron produced ionization in electric discharge ArF* excimer lasers

    NASA Astrophysics Data System (ADS)

    Xiong, Zhongmin; Kushner, Mark J.

    2011-10-01

    Electric discharge excimer lasers are sustained in multi-atmosphere attaching gas mixtures that are typically preionized to enable a reproducible, uniform glow, which maximizes optical quality and gain. This preionization is often accomplished using UV light produced by a corona discharge within the plasma cavity. To quantify the relationship between corona discharge properties and those of the laser discharge, the triggering of electron avalanche by preionizing UV light in an electric discharge-pumped ArF* excimer laser was numerically investigated using a two-dimensional model. The preionizing UV fluxes were generated by a corona-bar discharge driven by the same voltage pulse as the main discharge sustained in a multi-atmospheric Ne/Ar/Xe/F2 gas mixture. The resulting peak photo-electron density in the inter-electrode spacing is around 108 cm-3, and its distribution is biased toward the UV source. The preionization density increases with increasing dielectric constant and capacitance of the corona bar. The symmetry and uniformity of the discharge are, however, improved significantly once the main avalanche develops. In addition to bulk electron impact ionization, the ionization generated by sheath accelerated secondary electrons was found to be important in sustaining the discharge current at experimentally observed values. At peak current, the magnitude of the ionization by sheath accelerated electrons is comparable to that from bulk electron impact in the vicinity of the cathode.

  6. Ablation of bone and polymethylmethacrylate by an XeCl (308 nm) excimer laser

    SciTech Connect

    Yow, L.; Nelson, J.S.; Berns, M.W.

    1989-01-01

    One of the main problems in orthopaedics is the surgical removal of hard substances, such as bone and polymethylmethacrylate (PMMA). Such materials are often very difficult to remove without mechanical trauma to the remaining tissue. This study investigated the feasibility of the ultraviolet 308 nm excimer laser in the ablation of these materials. The beam was delivered through a 1 mm-diameter fiber optic at 40 Hz with energy densities at the target surface of 20-80 J/cm2 per pulse. The goal of the study was to establish the ideal dosimetry for removing bone and PMMA with minimum trauma to the adjacent tissue. Histology revealed that the 308 nm laser effectively removed bone leaving a thermal damage zone of only 2-3 microns in the remaining tissue. Increasing the energy per pulse gave correspondingly larger and deeper cuts with increasing zones of thermal damage. The excimer laser was also effective in the ablation of PMMA, creating craters in the substrate with a thermal damage zone of 10-40 microns. The debris from both substrates was evaluated.

  7. Excimer laser induced diffusion in magnetic semiconductor quantum wells

    NASA Astrophysics Data System (ADS)

    Howari, H.; Sands, D.; Nicholls, J. E.; Hogg, J. H. C.; Stirner, T.; Hagston, W. E.

    2000-08-01

    Studies of pulsed laser annealing (PLA) of CdTe/CdMnTe quantum well structures are made in order to examine depth dependent effects in laser irradiated semiconductors. Since diffusion coefficients are strongly dependent on the temperature, depth resolution is achieved because the diffusion of Mn from the barriers into the quantum wells is depth dependent. Multiple quantum well (MQW) structures of CdTe/CdMnTe were annealed with single pulses from an XeCl laser at 308 nm. At a threshold of 90 mJ cm-2 two new emission bands are observed that are attributed to the diffusion of Mn from barrier layers to QWs. The diffusion associated with these bands, measured as the integrated product of the diffusion constant and time, is found to be 300 and 30 Å2. Calculations of the temperature, reached within the surface following PLA, using an analytical solution of the heat diffusion equation coupled with known high temperature diffusion coefficients predict the diffusion to decrease by one order of magnitude within one period at the top of the MQW stack. It is suggested that at the threshold surface melting occurs and that these emission bands arise from the QWs immediately beneath the melt front. The diffusion of Mn ions into the QWs is confirmed by magneto-optical data. A further emission band occurs at this same threshold with a Mn concentration above that of the concentration in the barrier layers of the MQW stack. This emission is attributed tentatively to the segregation of the Mn ion within the molten region following recrystallization.

  8. The Results of Raster-Scan Laser Conditioning Studies on DKDP Triplers Using Nd: YAG and Excimer Lasers

    SciTech Connect

    Runkel, M; Neeb, K; Staggs, M; Auerbach, J; Burnham, A

    2001-11-01

    In this paper we present the results of damage tests performed at 1064 and 355-nm at 8-10 ns on conventional and rapid growth DKDP tripler crystals. The crystals were laser conditioned prior to damage testing by raster scanning using either Nd:YAG (1064 and 355 nm, 8-10ns) or excimer lasers at 248, 308 or 351 nm with pulse durations of approximately 30-47 ns. The results show that it is possible to attain increases in 355-nm damage probability fluences of 2X for excimer conditioning at 248 and 308 nm. However these wavelengths can induce absorption sufficient to induce bulk fracture by thermal shock when impurities such as arsenic, rubidium and sulfur are present in the crystals in sufficient quantity. Tests to evaluate the efficiency of 351-nm conditioning (XeF excimer) show improvements of 2X and that thermal fracture by induced absorption is not a problem. We also discuss our recent discovery that low fluence raster scanning at UV wavelengths leads to 1064-nm damage thresholds of over 100 J/cm{sup 2} (10-ns pulses).

  9. Performance characteristics of an excimer laser (XeCl) with single-stage magnetic pulse compression

    NASA Astrophysics Data System (ADS)

    Varshnay, N. K.; Singh, A.; Benerji, N. S.

    2017-02-01

    Performance characteristics of an excimer laser (XeCl) with single-stage magnetic pulse compression suitable for material processing applications are presented here. The laser incorporates in-built compact gas circulation and gas cooling to ensure fresh gas mixture between the electrodes for repetitive operation. A magnetically coupled tangential blower is used for gas circulation inside the laser chamber for repetitive operation. The exciter consists of C-C energy transfer circuit and thyratron is used as a high-voltage main switch with single-stage magnetic pulse compression (MPC) between thyratron and the laser electrodes. Low inductance of the laser head and uniform and intense pre-ionization are the main features of the electric circuit used in the laser. A 250 ns rise time voltage pulse was compressed to 100 ns duration with a single-stage magnetic pulse compressor using Ni-Zn ferrite cores. The laser can generate about 150 mJ at ˜100 Hz rep-rate reliably from a discharge volume of 100 cm 3. 2D spatial laser beam profile generated is presented here. The profile shows that the laser beam is completely filled with flat-top which is suitable for material processing applications. The SEM image of the microhole generated on copper target is presented here.

  10. Positive ion emission from oxidized aluminum during ultraviolet excimer laser irradiation

    SciTech Connect

    Khan, Enamul; Langford, S. C.; Dickinson, J. T.

    2011-07-15

    We report quadrupole mass-selected time-of-flight measurements of positive ions from oxidized aluminum metal (and for comparison, single-crystal sapphire) during pulsed excimer laser irradiation at 193 and 248 nm. This work focuses on laser fluences well below onset of rapid etching or optical breakdown. By far the most intense emissions are due to Al{sup +}. On previously unexposed material, the ion kinetic energies are initially well above the photon energy, consistent with the ejection of Al{sup +} sorbed at surface electron traps. During prolonged irradiation, the emission intensities and kinetic energies gradually fall. Emission from patches of oxide would account for previous reports of laser-induced Al{sup +} emission from metallic aluminum surfaces cleaned by ion etching if patches of thin oxide were to survive the etching treatment.

  11. Crack-free surface sealing of plasma sprayed ceramic coatings using an excimer laser

    NASA Astrophysics Data System (ADS)

    Liu, Z.

    2002-01-01

    Yttria stabilized zirconia coatings are typically used in the aerospace industry as high-temperature thermal barriers. These coatings are normally applied by plasma thermal spray, which has an inherent problem of producing coatings containing a substantial amount of open or closed porosity. Surface sealing of plasma sprayed ceramic coatings with CO 2 and Nd:YAG lasers is always associated with the problem of cracking on melted layers. Although some attempts such as pre-heating have been used to overcome the problem, formation of cracking is still not prevented, especially in zirconia-based ceramic coatings. The present work investigates an alternative method of surface sealing of plasma sprayed 8 wt.% Y 2O 3-ZrO 2 coatings using an excimer laser. The results show that smooth, crack-free and crater-free sealing can be obtained. Effects of laser operating parameters on the sealing quality and involved mechanism are also discussed.

  12. Excimer-laser-induced surface treatments on metal and ceramic materials: applications to automotive, aerospace, and microelectronic industries

    NASA Astrophysics Data System (ADS)

    Autric, Michel L.

    1999-09-01

    Surface treatments by laser irradiation can improve materials properties in terms of mechanical and physico- chemical behaviors, these improvements being related to the topography, the hardness, the microstructure, the chemical composition. Up to now, the use of excimer lasers for industrial applications remained marginal in spite of the interest related to the short wavelength (high photon energy and better energetic coupling with materials and reduced thermal effects in the bulk material). Up to now, the main limitations concerned the beam quality, the beam delivery, the gas handling and the relatively high investment cost. At this time, the cost of laser devices is going down and the ultraviolet radiation can be conducted through optical fibers. These two elements give new interest in using excimer laser for industrial applications. The main objective of this research program which we are involved in, is to underline some materials processing applications for automotive, aerospace or microelectronic industries for which it could be more interesting to use excimer lasers (minimized thermal effects). This paper concerns the modifications of the roughness, porosity, hardness, structure, phase, residual stresses, chemical composition of the surface of materials such as metallic alloys (aluminum, steel, cast iron, titanium, and ceramics (oxide, nitride, carbide,...) irradiated by KrF and XeCl excimer lasers.

  13. Characterization of excimer laser ablation generated pepsin particles using multi-wavelength photoacoustic instrument

    NASA Astrophysics Data System (ADS)

    Hopp, B.; Kecskeméti, G.; Smausz, T.; Ajtai, T.; Filep, A.; Utry, N.; Kohut, A.; Bozóki, Z.; Szabó, G.

    2012-05-01

    Preparation of organic thin layers on various special substrates using the pulsed laser deposition (PLD) technique is an important task from the point of view of bioengineering and biosensor technologies. Earlier studies demonstrated that particle ejection starts during the ablating laser pulse resulting in significant shielding effects which can influence the real fluence on the target surface and consequently the efficiency of layer preparation. In this study, we introduce a photoacoustic absorption measurement technique for in-situ characterization of ablated particles during PLD experiments. A KrF excimer laser beam ( λ=248 nm, FWHM=18 ns) was focused onto pepsin targets in a PLD chamber; the applied laser fluences were 440 and 660 mJ/cm2. We determined the wavelength dependence of optical absorption and mass specific absorption coefficient of laser ablation generated pepsin aerosols in the UV-VIS-NIR range. On the basis of our measurements, we calculated the absorbance at the ablating laser wavelength, too. We demonstrated that when the laser ablation generated pepsin aerosols spread through the whole PLD chamber the effect of absorptivity is negligible for the subsequent pulses. However, the interaction of the laser pulse and the just formed particle cloud generated by the same pulse is more significant.

  14. CD-SEM measurement line edge roughness test patterns for 193 nm lithography

    NASA Astrophysics Data System (ADS)

    Bunday, Benjamin D.; Bishop, Michael; Villarrubia, John S.; Vladar, Andras E.

    2003-07-01

    The measurement of line-edge roughness (LER) has recently become a major topic of concern in the litho-metrology community and the semiconductor industry as a whole, as addressed in the 2001 International Technology Roadmap for Semiconductors (ITRS) roadmap. The Advanced Metrology Advisory Group (AMAG, a council composed of the chief metrologists from the International SEMATECH (ISMT) consortium"s Member Companies and from the National Institute of Standards and Technology (NIST) has begun a project to investigate this issue and to direct the critical dimension scanning electron microscope (CD-SEM) supplier community towards a semiconductor industry-backed solution for implementation. The AMAG group has designed and built a 193 nm reticle that includes structures implementing a number of schemes to intentionally cause line edge roughness of various spatial frequencies and amplitudes. The lithography of these structures is in itself of interest to the litho-metrology community and will be discussed here. These structures, along with several other photolithography process variables, have been used to fabricate a set of features of varying roughness value and structure which span the LER process space of interest. These references are, in turn, useful for evaluation of LER measurement capability. Measurements on different CD-SEMs of major suppliers were used to demonstrate the current state of LER measurement. These measurements were compared to roughness determined off-line by analysis of top-down images from these tools. While no official standard measurement algorithm or definition of LER measurement exists, definitions used in this work are presented and compared in use. Repeatability of the measurements and factors affecting their accuracy were explored, as well as how CD-SEM parameters can affect the measurements.

  15. Photolysis of Pure Solid O3 and O2 Films at 193nm

    NASA Technical Reports Server (NTRS)

    Raut, U.; Loeffler, M. J.; Fama, M.; Baragiola, R. A.

    2011-01-01

    We studied quantitatively the photochemistry of solid O3 and O2 films at 193 nm and 22 K with infrared spectroscopy and microgravimetry. Photolysis of pure ozone destroyed O3, but a small amount of ozone remained in the film at high fluence. Photolysis of pure O2 produced O3 in an amount that increased with photon fluence to a stationary level. For both O2 and O3 films, the O3:O2 ratio at large fluences is ?0.07, about two orders of magnitude larger than those obtained in gas phase photolysis. This enhancement is attributed to the increased photodissociation of O2 due to photoabsorption by O2 dimers, a process significant at solid-state densities. We obtain initial quantum yield for ozone synthesis from solid oxygen, phi (O3) = 0.24 0.06, and quantum yields for destruction of O3 and O2 in their parent solids, phi(-O3) = 1.0 0.2 and phi(-O2) = 0.36 0.1. Combined with known photoabsorption cross sections, we estimate probabilities for geminate recombination of 0.5 0.1 for O3 fragments and 0.88 0.03 for oxygen atoms from O2 dissociation. Using a single parameter kinetic model, we deduce the ratio of reaction cross sections for an O atom with O2 vs. O3 to be 0.1 0.2. The general good agreement of the model with the data suggests the validity of the central assumption of efficient energy and spin relaxation of photofragments in the solid prior to their reactions with other species.

  16. Photodissociation of vinyl cyanide at 193 nm: Nascent product distributions of the molecular elimination channels

    SciTech Connect

    Wilhelm, Michael J.; Nikow, Matthew; Letendre, Laura; Dai Hailung

    2009-01-28

    The photodissociation dynamics of vinyl cyanide (H{sub 2}CCHCN, acrylonitrile) and deuterated vinyl cyanide (D{sub 2}CCDCN) at 193 nm are examined using time-resolved Fourier transform infrared emission spectroscopy. Prior photofragment translational spectroscopy studies [D. A. Blank et al., J. Chem. Phys. 108, 5784 (1998)] of the dissociation have observed the presence of four main dissociation channels; two molecular and two radical in nature. However, with the exception of a<0.01 quantum yield determined for the CN radical loss channel, the branching ratios of the remaining three elimination channels were not measured. The time-resolved emission spectra, including those from the deuterated samples, revealed the presence of acetylene, hydrogen cyanide (HCN), as well as the energetically less stable isomer hydrogen isocyanide (HNC). Acetylene is found in two distinct energetic distributions, suggesting that both three- and four-centered elimination reactions are occurring significantly in the dissociation. In contrast to prior ab initio studies that have suggested the dominant nature of the three-center elimination of molecular hydrogen (H{sub 2}) and cyanovinylidene (:C=CHCN), we find this reaction channel to be of little importance as there is no evidence to support any significant presence of rovibrationally excited cyanoacetylene. Spectral modeling of the product distributions allows for the first experimental determination of the relative occurrence of the three-centered (resulting in HCN+vinylidene) versus four-centered (HNC+acetylene) elimination channels as 3.34 to 1.00, in contrast to the previously calculated value of 126:1. Rice-Ramsperger-Kassel-Marcus analysis depicts that the transition state energy of the four-centered reaction should be about 10 kcal mole{sup -1} lower than the three-centered reaction.

  17. Effects of XeCl excimer lasers and fluoride application on artificial caries-like lesions

    NASA Astrophysics Data System (ADS)

    Wilder-Smith, Petra B. B.; Phan, T.; Liaw, Lih-Huei L.; Berns, Michael W.

    1994-09-01

    In this study the affects of a pulsed excimer laser emitting at 308 nm (XeCl) on enamel susceptibility to artificial caries-like lesions were investigated. Additional effects of fluoride (F) application were also studied and SEC examinations performed. Sixty-four extracted human molar teeth were coated with acid resistant varnish leaving four windows, then sectioned, leaving one window on each tooth quarter. The windows were treated in one of the following ways: untreated (control), or lased, or exposed to 4 min. APF (1.23% F) before lasing, or exposed to 4 min. APF (1.23% F) after lasing. After lasing, microhardness profiles were obtained and SEM was performed. Caries resistance was generally increased at moderate fluences. F application combined with lasing enhanced caries resistance at some parameters. SEM showed effects ranging from minimal to localized effects to extended glazing. Pulsed excimer laser irradiation, especially combined with topical F application can inhibit development of artificial caries-like lesions.

  18. Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics

    NASA Astrophysics Data System (ADS)

    Flury, M.; Benatmane, A.; Gérard, P.; Montgomery, P. C.; Fontaine, J.; Engel, T.; Schunck, J. P.; Fogarassy, E.

    2003-03-01

    We propose a low cost technique for the production of diffractive optical elements (DOE). These elements are devoted to high power lasers beam shaping in the mid-infrared wavelengths. This process called laser ablation lithography (LAL), may seem similar to laser beam writing (LBW) in the way the whole DOE's design is reproduced pixel by pixel on the substrate placed on a computer controlled XY translation stage. A first difference is that the photoresist is not exposed with UV light but is directly ablated with short excimer laser pulses. Furthermore, with LAL technique the size of the smallest pixel ( 5 μm×5 μm) is more than 10 times greater than those produced by LBW. We discuss in details the experimental set-up for LAL and demonstrate that it gives a resolution up to 10 times greater than photolithography with flexible masks. This makes LAL a promising solution for the production of DOE for use with Nd:YAG lasers. New applications of DOEs are finally introduced with high power lasers sources, such as laser marking or multi-point brazing.

  19. About Losses in Pumping Generators of High-Power Electrodischarge Excimer Lasers

    NASA Astrophysics Data System (ADS)

    Ivanov, N. G.; Losev, V. F.

    2015-04-01

    Energy losses in pumping systems of discharge high-power lasers are investigated. To estimate the losses, the discharge circuit operation was modeled, and its calculation was performed using the program PSpice. Results of measurements and calculations demonstrate that the resistance of a rail gap with electric field distortion exceeds several times the resistance of a single-channel gap without field distortion. A difference in the resistances is explained by different mechanisms of discharge burning: in the first case diffusion mechanism and in the second case the spark mechanism. The low efficiency of the high-power excimer lasers (~1%) is explained by high energy losses in the rail gap that reach more than 50% of the initially stored energy.

  20. Surface, structural and mechanical properties of zirconium ablated by KrF excimer laser radiation

    NASA Astrophysics Data System (ADS)

    Ali, Nisar; Bashir, Shazia; Umm-i-Kalsoom; Begum, Narjis; Waqas Ahmad, Syed

    2016-11-01

    We study the effect of the ambient - dry (air) and wet (propanol) - environment on the surface, structural and mechanical properties of zirconium samples after irradiation with a KrF excimer laser (wavelength of 248 {\\text{nm}}, pulse duration of 20 {\\text{ns}} and repetition rate of 20 {\\text{Hz}}). The samples are exposed to an increasing number of laser pulses varying from 500 to 2000 in both media. Various features of the treated targets such as surface morphology, chemical composition, crystalline structure and hardness are analysed by complementary characterisation techniques, such as scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD), Raman spectroscopy and Vickers hardness tester, respectively. Surface morphology and hardness are explained on the basis of modifications in crystalinity, residual pressures and chemical properties of the sample surface after its irradiation.

  1. Evaluation of the Efficacy of Excimer Laser Ablation of Cross-Linked Porcine Cornea

    PubMed Central

    Chen, Shihao; Li, Yini; Stojanovic, Aleksander; Zhang, Jia; Wang, Yibo; Wang, Qinmei; Seiler, Theo

    2012-01-01

    Background Combination of riboflavin/UVA cross-linking (CXL) and excimer laser ablation is a promising therapy for treating corneal ectasia. The cornea is strengthened by cross-linking, while the irregular astigmatism is reduced by laser ablation. This study aims to compare the efficacy of excimer laser ablation on porcine corneas with and without cross-linking. Methods and Findings The porcine cornea was de-epithelialized and treated with 0.1% riboflavin solution for 30 minutes. A half of the cornea was exposed to UVA-radiation for another 30 minutes while the controlled half of the cornea was protected from the UVA using a metal shield. Photo therapeutic keratectomy (PTK) was then performed on the central cornea. Corneal thickness of 5 paired locations on the horizontal line, ±0.5, ±1.0, ±1.5, ±2.0, and ±2.5 mm from the central spot, were measured using optical coherence tomography prior to and after PTK. The ablation depth was then determined by the corneal thickness. There was a 9% difference (P<0.001) in the overall ablation depth between the CXL-half corneas (158±22 µm) and the control-half corneas (174±26 µm). The ablation depths of all 5 correspondent locations on the CXL-half were significantly smaller (P<0.001). Conclusion The efficacy of the laser ablation seems to be lower in cross-linked cornea. Current ablation algorithms may need to be modified for cross-linked corneas. PMID:23056269

  2. Time-resolved spectroscopy and fluorescence resonance energy transfer in the study of excimer laser damage of chromatin

    NASA Astrophysics Data System (ADS)

    Radu, L.; Mihailescu, I.; Radu, S.; Gazdaru, D.

    2007-09-01

    The analysis of chromatin damage produced by a 248 nm excimer laser radiation, for doses of 0.3-3 MJ/m 2 was carried out by time-resolved spectroscopy and fluorescence resonance energy transfer (FRET). The chromatin was extracted from a normal and a tumoral tissue of Wistar rats. The decrease with laser dose of the relative contribution of the excited state lifetimes of ethidium bromide (EtBr) bounded to chromatin constitutes an evidence of the reduction of chromatin deoxyribonucleic acid (DNA) double-strand structure. FRET was performed from dansyl chloride to acridine orange, both coupled to chromatin. The increase of the average distance between these ligands, under the action of laser radiation, reflects a loosening of the chromatin structure. The radiosensitivity of tumor tissue chromatin is higher than that of a normal tissue. The determination of the chromatin structure modification in an excimer laser field can be of interest in laser therapy.

  3. Automated measurement of the EUREKA EU213 excimer laser pulse-forming line

    NASA Astrophysics Data System (ADS)

    Boardman, Allan D.; Hodgson, Elizabeth M.; Spence, A. J.; Wilkins, M.; Wu, Jian; Ashton, J. A.

    1990-08-01

    This paper describes part of the EUREKA Eurolaser project EU213, to build an excimer laser. The emphasis is on control and monitoring systems. The performance of a test-bed laser built at Salford will be described. In the design discussed, two voltage components are generated separately and combined at the laser head to form a pumping pulse. A "magnetic switch" is used to isolate the two parts of the transmission line'. A theoretical analysis of the sustainer section of the line has been carried out and compared with measurements made using a dummy load in place of the laser head. A control system is discussed that is being developed to monitor the shape of each laser pulse at a high repetition rate. The control system is designed to protect the laser from damage. The construction of various conventional probes, and the progress towards various fibre probes will be reported with emphasis on measuring fast current pulses on the various parts of the line.

  4. Visual outcomes of topography-guided excimer laser surgery for treatment of patients with irregular astigmatism.

    PubMed

    Ghoreishi, Mohammad; Naderi Beni, Afsaneh; Naderi Beni, Zahra

    2014-01-01

    The aim of this study was to evaluate the efficacy, safety, and predictability of topography-guided treatments to enhance refractive status following other corneal surgical procedures. In a prospective case series study, 28 consecutive eyes of 26 patients with irregular astigmatism after radial keratotomy, corneal transplant, small hyperopic and myopic excimer laser optical zones, and corneal scars were operated. Laser-assisted in situ keratomileusis (LASIK) (n = 8) and photorefractive keratectomy (PRK) (n = 20) were performed using the ALLEGRETTO WAVE excimer laser and topography-guided customized ablation treatment software. Preoperative and postoperative uncorrected visual acuity (UCVA), best corrected visual acuity (BCVA), manifest and cycloplegic refraction, and corneal topography with asphericity were analyzed in 12 months follow-up. Uncorrected visual acuity (UCVA) changed from 0.2 ± 0.2 or (20/100 ± 20/100) to 0.51 ± 0.31 or (20/40 ± 20/60) in the LASIK group (P = 0.01) and from 0.34 ± 0.16 or (20/60 ± 20/120) to 0.5 ± 0.23 or (20/40 ± 20/80) in the PRK group (P = 0.01). Refractive cylinder decreased from -3.2 ± 0.84 diopters (D) to -2.06 ± 0.42 D in the LASIK group (P = 0.07) and from -2.25 ± 0.39 D to -1.5 ± 0.23 D in the PRK group (P = 0.008). Best corrected visual acuity did not change significantly in either group. Topography-guided treatment is effective in correcting the irregular astigmatism after refractive surgery. Topography-guided PRK can significantly reduce irregular astigmatism and increase the UCVA and BCVA.

  5. Excimer Lasers

    DTIC Science & Technology

    1976-06-01

    CONTINUE 46 C HATE CONSTANTS - ELCTRONIC VD=SQRT(2*TE/MASXE)* 3E10 J=NE*E*VD VDISC=V-H*J*A-L*A*E*VD*(NE-NEP)/DT NEP=NE RC=6.38E7*(5QRT(2*TE))**3...TG)/ 3E10 +CSTMDE*P**2*EXP(-VüXE/ +TG)*.25/3EI0 BETAD=CSTMD*P**2*EXP(-VDX/TG)*.25/ 3E10 GAJNE=CSTME*(PX1*EXP(-VEA/TG)/(KAEX*1.5)-2*P*XE*EXP(-VEX/TG...3EI0 +-CSTMDE*(P**2*EXP(-VDXE/TG)*.25)/ 3E10 GAIND=CSTMD*(PD1*EXP(-VDA/TG)/(KADI*12)-P**2*EXP(-VDX/TG)*.25) +/3EI0 C OUTPUT IF(ISTEP/IPrMNT-FL()AT

  6. Effect of an antioxydant cream versus placebo in patients with vitiligo in association with excimer laser. A pilot randomized, investigator-blinded, and half-side comparison trial.

    PubMed

    Leone, G; Paro Vidolin, A

    2015-08-01

    The aim of this study was to evaluate the combined effect of excimer laser and a topical antioxidant in the treatment for vitiligo. The study was conducted in a single blinded design on 10 vitiligo patients with symmetrical vitiligo lesions treated with the active antioxidant or a placebo that were irradiated with an excimer laser. Results have shown that the lesions treated with the active cream achieved earlier regimentation compared to the placebo. The use of a cream containing antioxidants may improve the results of excimer laser treatment in patients with vitiligo.

  7. Fluorescence imaging inside an internal combustion engine using tunable excimer lasers.

    PubMed

    Andresen, P; Meijer, G; Schlüter, H; Voges, H; Koch, A; Hentschel, W; Oppermann, W; Rothe, E

    1990-06-01

    Tunable excimer lasers are used to obtain 2-D images of molecular (and some state-specific) density distributions inside a cylinder of a modified four-cylinder in-line engine that has optical access. Natural fluorescence (i.e., without a laser) is used for some OH pictures, normal laser-induced fluorescence (LIF) for those of NO and of the isooctane fuel, and laser-induced predissociative fluorescence (LIPF) for other OH pictures and for those of O(2). Relevant spectroscopy is done to find the laser and fluorescence frequencies needed to measure isolated species. LIPF works well at high pressures, is state specific, and is ideally suited to follow turbulent processes. No similar measurements in engines have been previously reported. Pictures are taken in succeeding engine cycles. Their sequence is either at a particular point of the engine's cycle to show cyclic fluctuations, or at succeeding portions of the cycle to illustrate the progress of the gasdynamics or of the combustion.

  8. Irradiation planning for automated treatment of psoriasis with a high-power excimer laser

    NASA Astrophysics Data System (ADS)

    Klämpfl, Florian; Schmidt, Michael; Hagenah, Hinnerk; Görtler, Andreas; Wolfsgruber, Frank; Lampalzer, Ralf; Kaudewitz, Peter

    2006-02-01

    American and European statistics have shown that 1-2 per cent of the human population is affected by the skin disease psoriasis. Recent research reports promising treatment results when irradiating skin areas affected by psoriasis with high powered excimer lasers with a wavelength of 308 nm. In order to apply the necessary high energy dose without hurting healthy parts of the skin new approaches regarding the system technology must be considered. The aim of the current research project is the development of a sensor-based, automated laser treatment system for psoriasis. In this paper we present the algorithms used to cope with the diffculties of irradiating irregularly shaped areas on curved surfaces with a predefined energy level using a pulsed laser. Patients prefer the treatment to take as little time as possible. This also helps to reduce costs. Thus the distribution of laser pulses on the surface to achieve the given energy level on every point of the surface has to be calculated within a limited time frame. The remainder of the paper will describe in detail an efficient method to plan and optimize the laser pulse distribution. Towards the end, some first results will be presented.

  9. Alternatives to excimer laser refractive surgery: UV and mid-infrared laser ablation of intraocular lenses and porcine cornea

    NASA Astrophysics Data System (ADS)

    Serafetinides, A. A.; Makropoulou, M.; Spyratou, E.; Bacharis, C.

    2007-03-01

    Despite the fact that the laser applications in human ophthalmology are well established, further research is still required, for better and predictable ablation dosimetry on both cornea tissue and intraocular lenses. Further studies for alternative laser sources to the well established excimer lasers, such as UV or mid-infrared solid state lasers, have been proposed for refractive surgery. The precise lens ablation requires the use of laser wavelengths possessing a small optical penetration depth in the cornea and in the synthetic lenses, in order to confine the laser energy deposition to a small volume. In order to eliminate some very well known problems concerning the reshaping of cornea and the modification of the optical properties of the intraocular lenses, ablation experiments of ex vivo porcine cornea, acrylic PMMA and hydrophilic lenses were conducted with an Er:YAG laser (2.94 μm) and the fifth harmonic of a Nd:YAG laser (213 nm). The morphology of cornea was recorded using a cornea topography system before and immediately after the ablation. Histology analysis of the specimens was obtained, in order to examine the microscopic appearance of the ablated craters and the existence of any thermal damage caused by the mid-infrared and UV laser irradiation. The macroscopic morphology of the intraocular lens craters was inspected with an optical transmission microscope. Measurements of the ablation rates of the lenses were performed and simulated by a mathematical model.

  10. Micromachining of polyurethane (PU) polymer using a KrF excimer laser (248 nm)

    NASA Astrophysics Data System (ADS)

    Singh, Sarabpreet; Sharma, Sunil

    2014-12-01

    Polyurethane (PU) polymer, due to its biocompatibility, weather resistance, and favorable physical properties, finds a number of applications in medical implants, protective coatings, and as a prototype material for structural components in MEMS devices. An excimer laser (wavelength = 248 nm, FWHM = 25 ns) is employed for micromachining of polyurethane (PU) polymer. For air environment, the ablation rate is 0.18 μm/pulse and for underwater environment, the ablation rate is 0.07 μm/pulse (with underwater ablation threshold as 0.10 J/cm2), which concluded low taper angles (∼32°) for in air as compared to high taper angles (∼65°) with underwater micromachining. The experimental results for air and under water micromachining demonstrate ablation process as a combination of photo-thermal and photo-chemical mechanism.

  11. [The effect of tranilast on subepithelial corneal opacity after excimer laser keratectomy].

    PubMed

    Sakai, T; Okamoto, S; Iwaki, Y

    1997-10-01

    Recent studies have reported that tranilast inhibited in vitro the proliferation of keratocytes from corneal subepithelial opacities (haze) and collagen synthesis in cultured corneas after excimer laser photorefractive keratectomy (PRK). In this study 0.5% tranilast eye drops, 0.1% betametazone phosphate eyedrops, and a 0.5% tranilast base solution (control) were administered four times daily to rabbits which had undergone PRK. Weekly evaluation of the inhibitory effect of these drugs on haze began two weeks after surgery according to Fantes' classification. 0.5% tranilast suppressed haze from six weeks to thirteen weeks after PRK (p < 0.05). 0.1% betametazone phosphate showed no effect. These results suggested that 0.5% tranilast had a satisfactory therapeutic effect on haze after PRK.

  12. Interaction of 308-nm excimer laser light with temporomandibular joint related structures

    NASA Astrophysics Data System (ADS)

    Liesenhoff, Tim; Funk, Armin

    1994-02-01

    Arthroscopy of TMJ has become a clinically important and more and more accepted method for diagnosis and treatment of TMJ alteration. This minimal invasive method is clearly limited by the anatomical dimensions of the TMJ. A 308 nm excimer laserlight has already found clinical applications in angioplasty, ophthalmology, and dentistry. The aim of the presented study was to find out if it is possible to ablate TMJ related structures under arthroscopic conditions. It also aims to evaluate the energy-threshold for ablation and the maximal possible rate of ablation. Contrary to other laser systems it offers a unique combination of minimal tissue alteration, precise tissue ablation guidability through optical fibers, and a good transmission through water.

  13. Effects of Plasma Formation on the Cesium Diode (DPAL) and Excimer (XPAL) Pumped Alkali Laser

    NASA Astrophysics Data System (ADS)

    Markosyan, Aram H.; Kushner, Mark J.

    2015-09-01

    Diode pumped alkali lasers (DPALs) and excimer pumped alkali lasers (XPALs) are being investigated as a means to convert optical pumps having poor optical quality to laser radiation having high optical quality. DPALs sustained in Cs vapor are pumped on the D2(852.35 nm), Cs(62S1/2) --> Cs(62P3/2) , transition and lase on the D1(894.59 nm) transition, Cs(62P1/2) --> Cs(62S1/2) . Collisional mixing (spin orbit relaxation) of the Cs(62P3/2) and Cs(62P1/2) levels is a key part of this three-level (in fact, a quasi-two-level) laser scheme. In the five-level XPAL pumping scheme, the CsAr(B2Σ1/ 2 +) state is optically pumped by 836.7 nm pulses, which later dissociates and produces Cs(62P3/2) . As in DPAL, a collisional relaxant transfers the population of Cs(62P3/2) to Cs(62P1/2) , which enables lasing on D1 transition. A first principals global computer model has been developed for both systems to investigate the effects of plasma formation on the laser performance. Argon is used as a buffer gas and nitrogen or ethane are used as a collisional relaxant at total pressure of 600 Torr at temperatures of 350-450 K, which produces vapor pressures of Cs of <0.1 Torr. In both systems, a plasma formation in excess of 1014 - 1016cm-3 occurs, which potentially reduces laser output power by electron collisional mixing of upper and lower laser levels. Work supported by DoD High Energy Laser Multidisc, Res. Initiative.

  14. Analysis of the change in peak corneal temperature during excimer laser ablation in porcine eyes

    NASA Astrophysics Data System (ADS)

    Mosquera, Samuel Arba; Verma, Shwetabh

    2015-07-01

    The objective is to characterize the impact of different ablation parameters on the thermal load during corneal refractive surgery by means of excimer laser ablation on porcine eyes. One hundred eleven ablations were performed in 105 porcine eyes. Each ablation was recorded using infrared thermography and analyzed mainly based on the two tested local frequencies (40 Hz, clinical local frequency; 1000 Hz, no local frequency). The change in peak corneal temperature was analyzed with respect to varying ablation parameters [local frequency, system repetition rate, pulse energy, optical zone (OZ) size, and refractive correction]. Transepithelial ablations were also compared to intrastromal ablations. The average of the baseline temperature across all eyes was 20.5°C±1.1 (17.7°C to 22.2°C). Average of the change in peak corneal temperature for all clinical local frequency ablations was 5.8°C±0.8 (p=3.3E-53 to baseline), whereas the average was 9.0°C±1.5 for all no local frequency ablations (p=1.8E-35 to baseline, 1.6E-16 to clinical local frequency ablations). A logarithmic relationship was observed between the changes in peak corneal temperature with increasing local frequency. For clinical local frequency, change in peak corneal temperature was comparatively flat (r2=0.68 with a range of 1.5°C) with increasing system repetition rate and increased linearly with increasing OZ size (r2=0.95 with a range of 2.4°C). Local frequency controls help maintain safe corneal temperature increase during excimer laser ablations. Transepithelial ablations induce higher thermal load compared to intrastromal ablations, indicating a need for stronger thermal controls in transepithelial refractive procedures.

  15. Stretchable multilayer self-aligned interconnects fabricated using excimer laser photoablation and in situ masking

    NASA Astrophysics Data System (ADS)

    Lin, Kevin L.; Jain, Kanti

    2009-02-01

    Stretchable interconnects are essential to large-area flexible circuits and large-area sensor array systems, and they play an important role towards the realization of the realm of systems which include wearable electronics, sensor arrays for structural health monitoring, and sensor skins for tactile feedback. These interconnects must be reliable and robust for viability, and must be flexible, stretchable, and conformable to non-planar surfaces. This research describes the design, modeling, fabrication, and testing of stretchable interconnects on polymer substrates using metal patterns both as functional interconnect layers and as in-situ masks for excimer laser photoablation. Excimer laser photoablation is often used for patterning of polymers and thin-film metals. The fluences for photoablation of polymers are generally much lower than the threshold fluence for removal or damage of high-thermallyconductive metals; thus, metal thin films can be used as in-situ masks for polymers if the proper fluence is used. Selfaligned single-layer and multi-layer interconnects of various designs (rectilinear and 'meandering') have been fabricated, and certain 'meandering' interconnect designs can be stretched up to 50% uniaxially while maintaining good electrical conductivity and structural integrity. These results are compared with Finite Element Analysis (FEA) models and are observed to be in good accordance with them. This fabrication approach eliminates masks and microfabrication processing steps as compared to traditional fabrication approaches; furthermore, this technology is scalable for large-area sensor arrays and electronic circuits, adaptable for a variety of materials and interconnects designs, and compatible with MEMS-based capacitive sensor technology.

  16. Analysis of the change in peak corneal temperature during excimer laser ablation in porcine eyes.

    PubMed

    Arba Mosquera, Samuel; Verma, Shwetabh

    2015-07-01

    The objective is to characterize the impact of different ablation parameters on the thermal load during corneal refractive surgery by means of excimer laser ablation on porcine eyes. One hundred eleven ablations were performed in 105 porcine eyes. Each ablation was recorded using infrared thermography and analyzed mainly based on the two tested local frequencies (40 Hz, clinical local frequency; 1000 Hz, no local frequency). The change in peak corneal temperature was analyzed with respect to varying ablation parameters [local frequency, system repetition rate, pulse energy, optical zone (OZ) size, and refractive correction]. Transepithelial ablations were also compared to intrastromal ablations. The average of the baseline temperature across all eyes was 20.5°C±1.1 (17.7°C to 22.2°C). Average of the change in peak corneal temperature for all clinical local frequency ablations was 5.8°C±0.8 (p=3.3E-53 to baseline), whereas the average was 9.0°C±1.5 for all no local frequency ablations (p=1.8E-35 to baseline, 1.6E-16 to clinical local frequency ablations). A logarithmic relationship was observed between the changes in peak corneal temperature with increasing local frequency. For clinical local frequency, change in peak corneal temperature was comparatively flat (r 2 =0.68 with a range of 1.5°C) with increasing system repetition rate and increased linearly with increasing OZ size (r 2 =0.95 with a range of 2.4°C). Local frequency controls help maintain safe corneal temperature increase during excimer laser ablations. Transepithelial ablations induce higher thermal load compared to intrastromal ablations, indicating a need for stronger thermal controls in transepithelial refractive procedures.

  17. Excimer laser micromachining of TiN films from chromium and copper sacrificial layers

    NASA Astrophysics Data System (ADS)

    Dowling, A. J.; Ghantasala, M. K.; Hayes, J. P.; Harvey, E. C.; Doyle, E. D.

    2002-10-01

    This paper presents results on the laser micromachining of TiN films. Machining performance was evaluated in terms of patterning quality and the ability to remove TiN with minimal interference with an underlying sacrificial layer. TiN was arc-deposited onto (100) silicon substrate with chromium (Cr) and copper (Cu) sacrificial layers. Films were also deposited onto bare silicon substrates under the same conditions. These films were analysed for their composition and structure using Rutherford backscattering spectroscopy and x-ray diffraction techniques. Laser micromachining was performed using a KrF excimer laser at 248 nm. The effect of fluence and number of shots on the machined features has been investigated in detail. The patterned features were examined using optical, confocal and scanning electron microscopes. The characteristics observed were analysed and compared in all three sets of samples. The results showed selective removal of TiN films from Cr and Cu sacrificial layers under different conditions. The machining of TiN from (100) silicon showed relatively poor definition of patterned features. The analysis of these results indicated that laser machining of TiN from Cr and Cu layers is best explained using the explosion mechanism of removal.

  18. Enhanced efficiency of the dye-sensitized solar cells by excimer laser irradiated carbon nanotube network counter electrode

    SciTech Connect

    Chien, Yun-San Fu, Wei-En; Yang, Po-Yu; Lee, I-Che; Chu, Chih-Chieh; Chou, Chia-Hsin; Cheng, Huang-Chung

    2014-02-03

    The carbon nanotube network decorated with Pt nanoparticles (PtCNT) irradiated by excimer laser as counter electrode (CE) of dye-sensitized solar cells (DSSCs) has been systematically demonstrated. The conversion efficiency would be improved from 7.12% to 9.28% with respect to conventional Pt-film one. It was attributed to the enhanced catalytic surface from Pt nanoparticles and the improved conductivity due to the adjoining phenomenon of PtCNTs irradiated by laser. Moreover, the laser annealing could also promote the interface contact between CE and conductive glass. Therefore, such a simple laser-irradiated PtCNT network is promising for the future flexible DSSCs applications.

  19. Preparation of metal oxide thin films using coating photolysis process with ArF excimer laser

    NASA Astrophysics Data System (ADS)

    Tsuchiya, Tetsuo; Watanabe, Akio; Imai, Yoji; Niino, Hiroyuki; Yabe, Akira; Yamaguchi, Iwao; Manabe, Takaaki; Kumagai, Toshiya; Mizuta, Susumu

    2000-11-01

    The preparation of metal oxide thin films have been developed using the metalorganic (MO) compounds coating photolysis process with ArF excimer laser irradiation at room temperature. The effect of the starting materials and irradiation method on the product films was investigated by FT-IR, UV, XRD and SEM. It was found that metal acetylacetonates or metal 2-ethylhexanoate was effective as the starting materials. When using metal acetylacetonates as the starting materials, crystallized TiO2, In2O3 and ZrO2 were obtained with ArF laser irradiation at 50 mJ/cm2 at a repetition rate of 5 Hz for 5 min. When using An-acac, Fe, Sn, or In 2-ethylhexanoate as the starting material, a two-step process consisting of both preliminary weak (10mJ/cm2) and sufficiently strong irradiation (50mJ/cm2) was found to be effective for obtaining crystallized ZnO, Fe2O3, SnO2 and In2O3 films. In addition, crystallized complex oxide thin films such as ITO, PbTo3 and PbZrO3 were successfully obtained from the metal acetylacetonates or metal 2-ethylhexanoate using MO coating photolysis process. Patterned metal oxide thin films were also obtained by the ArF laser irradiation through the photomask, followed by leaching with solvents. The crystallization mechanism was discussed from the point of view of the photochemical reaction and photothermal reaction.

  20. Excimer laser machining of microvias in glass substrates for the manufacture of high density interconnects

    NASA Astrophysics Data System (ADS)

    Bhatt, D.; Hutt, D. A.; Conway, P. P.

    2012-07-01

    Machining of microvias in 100-50 μm thick CMZ glass using an excimer laser (248 nm) was investigated. The effect of various laser process parameters: pulse energy, repetition rate, irradiation time were studied to optimise the microvia drilling process and a process window was identified. Through-hole drilling of 100 μm diameter (entry hole) microvias was achieved at a fluence (energy density) as low as 2.3 J/cm2 with an irradiation time of 30-40 s at a repetition rate of 20 Hz, giving a taper angle between 22-24∘ relative to the vertical. However, by increasing the fluence to 4.5 J/cm2, this reduced the machining time to 5-10 s and taper angle to 14∘, giving an exit hole diameter of around 45-50 μm. With 50 μm thick glass, it was possible to machine through-hole microvias with smaller entry hole diameters down to 40 μm. Machined microvias were characterised to investigate debris, recast layer and microcrack formation. Debris and recast layer around the machined features was minimised by using a protective photoresist layer coating on the glass and through appropriate operating parameter selection. Microcracks along the sidewalls of the microvias could not be avoided, but their severity depended on the laser machining parameters used.

  1. UV excimer laser and low temperature plasma treatments of polyamide materials

    NASA Astrophysics Data System (ADS)

    Yip, Yiu Wan Joanne

    Polyamides have found widespread application in various industrial sectors, for example, they are used in apparel, home furnishings and similar uses. However, the requirements for high quality performance products are continually increasing and these promote a variety of surface treatments for polymer modification. UV excimer laser and low temperature plasma treatments are ideally suited for polyamide modification because they can change the physical and chemical properties of the material without affecting its bulk features. This project aimed to study the modification of polyamides by UV excimer laser irradiation and low temperature plasma treatment. The morphological changes in the resulting samples were analysed by scanning electron microscopy (SEM) and tapping mode atomic force microscopy (TM-AFM). The chemical modifications were studied by x-ray photoelectron spectroscopy (XPS), time-of-flight secondary ion mass spectrometry (ToF-SIMS) and chemical force microscopy (CFM). Change in degree of crystallinity was examined by differential scanning calorimetry (DSC). After high-fluence laser irradiation, topographical results showed that ripples of micrometer size form on the fibre surface. By contrast, sub-micrometer size structures form on the polyamide surface when the applied laser energy is well below its ablation threshold. After high-fluence laser irradiation, chemical studies showed that the surface oxygen content of polyamide is reduced. A reverse result is obtained with low-fluence treatment. The DSC result showed no significant change in degree of crystallinity in either high-fluence or low-fluence treated samples. The same modifications in polyamide surfaces were studied after low temperature plasma treatment with oxygen, argon or tetrafluoromethane gas. The most significant result was that the surface oxygen content of polyamide increased after oxygen and argon plasma treatments. Both treatments induced many hydroxyl (-OH) and carboxylic acid (-COOH

  2. Formation and modification of surface alloys by excimer laser melting and resolidification

    SciTech Connect

    Jervis, T.R.; Nastasi, M.; Hirvonen, J.P. )

    1989-01-01

    The use of pulsed lasers operating in the ultra-violet for the formation and modification of metal alloys opens a range of processing techniques which offer the precision of ion beam techniques but at much higher processing rates. In addition, excimer laser surface processing offers the possibility of new surface modification technologies. Most metals have low reflectivities in the uv, so laser light is coupled strongly to the surface. The short pulse length of these lasers, along with a shallow absorption depth, results in a heated zone which is also quite shallow, of the order of 1 micrometer. Modest fluences, of the order of 1 J-cm{sup {minus}2} are sufficient to melt this surface zone. Typical quench rates from the melt are of the order of 10{sup 10} K-sec{sup {minus}1}; high enough to produce amorphous phases in some materials. Mixing by liquid phase diffusion between layers of vacuum evaporated materials and zone refinement can result from multiple melt resolidification events. These techniques make available a large range of alloy compositions on engineering materials. The surface morphology of the processed layers is quite smooth with a surface finish less than 100 nm. Further processing prior to use is therefore not required for most applications. We have studied laser mixing of metals into engineering materials, both metal alloys and ceramics, the formation of ceramic structures on metals, the modification of alloys by surface zone refinement, and the mixing of binary and ternary multilayer structures. 25 refs., 6 figs., 2 tabs.

  3. The effect on the ultrastructure of dental enamel of excimer-dye, argon-ion and CO2 lasers.

    PubMed

    Palamara, J; Phakey, P P; Orams, H J; Rachinger, W A

    1992-12-01

    This study aimed to investigate the ultrastructural changes that occur in dental enamel irradiated with pulsed excimer-dye, continuous-wave (CW) argon-ion and CW CO2 lasers. The pulsed excimer-dye laser produced deep craters, rough damaged surfaces with underlying porosity and amorphous vitrified material. The vitrification of the enamel indicated that the temperature in these areas must have been at least in the range 1280 to 1600 degrees C. The CW argon-ion laser irradiation produced a changed non-cratered surface with inter-crystalline porosity and a mixture of small and some large irregularly packed recrystallized enamel crystals. The CW CO2 laser produced shallow craters, surface crazing and lifting off the removal of the surface layer to expose the underlying roughened enamel. The ultrastructure revealed inter- and intra-crystalline porosity, a mixture of small but variable size irregularly packed recrystallized enamel crystals and also well packed large crystals which indicated further grain growth. The porosity in lased enamel was overall very similar to that seen in enamel heated in an electric furnace to a temperature of 600 degrees C. The presence of recrystallized enamel crystals indicated a temperature rise of approximately 1000 degrees C and the grain growth indicated that a temperature > or = 1000 degrees C existed for some time after the laser irradiation. In general the excimer-dye laser produced most surface destruction because of its higher power density and shorter interaction time and the argon-ion laser produced least damage. These results indicated that the lasers used in this study require much more refinement before they can find therapeutic application to dental enamel, and this may well be the case for other lasers being investigated for clinical dental practise.

  4. Statistical Examination of the a and a + 1 Fragment Ions from 193 nm Ultraviolet Photodissociation Reveals Local Hydrogen Bonding Interactions

    NASA Astrophysics Data System (ADS)

    Morrison, Lindsay J.; Rosenberg, Jake A.; Singleton, Jonathan P.; Brodbelt, Jennifer S.

    2016-09-01

    Dissociation of proteins and peptides by 193 nm ultraviolet photodissociation (UVPD) has gained momentum in proteomic studies because of the diversity of backbone fragments that are produced and subsequent unrivaled sequence coverage obtained by the approach. The pathways that form the basis for the production of particular ion types are not completely understood. In this study, a statistical approach is used to probe hydrogen atom elimination from a + 1 radical ions, and different extents of elimination are found to vary as a function of the identity of the C-terminal residue of the a product ions and the presence or absence of hydrogen bonds to the cleaved residue.

  5. Des lasers à excimères pour cristalliser le silicium des écrans plats : pourquoi ? comment ?

    NASA Astrophysics Data System (ADS)

    Prat, C.

    2003-06-01

    Les contraintes techniques et économiques de la fabrication d'écrans plats à cristaux liquides à matrice active ont suscité de nombreuses études de procédés de cristallisation de couches minces de silicium par laser à excimères, exploitant principalement trois types de phénomènes physiques, dans le but d'obtenir des cristaux micrométriques les plus uniformes possible.

  6. Direct immobilization of biotin on the micro-patterned PEN foil treated by excimer laser.

    PubMed

    Štofik, Marcel; Semerádtová, Alena; Malý, Jan; Kolská, Zdeňka; Neděla, Oldřich; Wrobel, Dominika; Slepička, Petr

    2015-04-01

    Polymers with functionalized surfaces have attracted a lot of attention in the last few years. Due to the progress in the techniques of polymer micro-patterning, miniaturized bioanalytical assays and biocompatible devices can be developed. In the presented work, we performed surface modification of polyethylene naphthalate (PEN) foil by an excimer laser beam through a photolithographic contact mask. The aim was to fabricate micro-patterned areas with surface functional groups available for localized covalent immobilization of biotin. It was found out that depending on the properties of the laser scans, a polymer surface exhibits different degrees of modification and as a consequence, different degrees of surface biotinylation can be achieved. Several affinity tests with optical detection of fluorescently labeled streptavidin were successfully performed on biotinylated micro-patterns of a PEN foil. The polymer surface properties were also evaluated by electrokinetic analysis, Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). The results have shown that PEN foils can be considered suitable substrates for construction of micro-patterned bioanalytical affinity assays.

  7. Adhesion strength measurements of excimer-laser-treated PTFE surfaces using liquid photoreagents

    NASA Astrophysics Data System (ADS)

    Hopp, Bela; Smausz, Tomi; Kresz, Norbert; Ignacz, Ferenc

    2003-04-01

    The most known feature of polytetrafluoroethylene (PTFE) is its adhesion behavior: it is hydrophobic and oleophobic at the same time. This can cause serious problems and obstacles during the surface treatment and fixing of PTFE objects. During our experiments Teflon films were irradiated by an ArF excimer laser beam in presence of liquid photoreagents containing amine groups (aminoethanol, 1,2-diaminoethane, triethylene-tetramine). In consequence of the treatment the adhesion of the modified surfaces significantly increased, the samples could be glued and moistened. The adhesion strength of the glued surfaces was measured in the function of the applied laser fluence. The adhesion strength increased drastically between 0 - 1 mJ/cm2 and showed saturation above 1 mJ/cm2 at approximately 5 - 9 MPa values depending on the applied photoreagents. On the basis of our experiments it was found that the treatment with triethylene-tetramine was the most effective. The surface chemical modifications of the treated Teflon samples can be due to the incorporation of amine groups into the surface layer.

  8. CAD/CAM interface design of excimer laser micro-processing system

    NASA Astrophysics Data System (ADS)

    Jing, Liang; Chen, Tao; Zuo, Tiechuan

    2005-12-01

    Recently CAD/CAM technology has been gradually used in the field of laser processing. The excimer laser micro-processing system just identified G instruction before CAD/CAM interface was designed. However the course of designing a part with G instruction for users is too hard. The efficiency is low and probability of making errors is high. By secondary development technology of AutoCAD with Visual Basic, an application was developed to pick-up each entity's information in graph and convert them to each entity's processing parameters. Also an additional function was added into former controlling software to identify these processing parameters of each entity and realize continue processing of graphic. Based on the above CAD/CAM interface, Users can design a part in AutoCAD instead of using G instruction. The period of designing a part is sharply shortened. This new way of design greatly guarantees the processing parameters of the part is right and exclusive. The processing of complex novel bio-chip has been realized by this new function.

  9. High power excimer laser image relay system analysis using Delano diagram

    NASA Astrophysics Data System (ADS)

    Zhang, Yongshen; Zhao, Jun; Zhao, Xueqing; Hu, Yun; Wang, Dahui; Xue, Quanxi; Liu, Jingru

    2013-05-01

    The characteristics of Delano diagram are especially helpful in instrumental systems type with considerably separated components. For high power excimer laser system, especially for image relay scheme, the Delano diagram method is highly advantageous for the system's thin lens layout design. A primitive experimental image relay and it's combination optical layout is investigated in our high power XeCl laser system, with intensity smoothed spatial incoherent source. Instead of the uniform intensity distribution on the target as expected, it is obvious shows in the final image on the target that a gauss like intensity profile and a large amount of astigmatism results. There are two possible reasons: the first one is that not keeping proper relay of pupil plane (or Fourier plane) in the final stage, simply care the collimated beam of virtual object in the final focusing stage. With the help of Delano diagram, it's clearly shown in the diagram that the Fourier plane and the image plane come very close, indicates that a complete image relay of the object plane and Fourier plane is needed. The second reason is due to the off-axis setup in the large aperture main amplifier, which introduce significant astigmatism aberrations in the final optical path. This question can be solved using proper tilt and de-center of reflective mirror pair setup, and two possible such combination pairs are proposed.

  10. N-type doping of Ge by As implantation and excimer laser annealing

    SciTech Connect

    Milazzo, R.; Napolitani, E. De Salvador, D.; Mastromatteo, M.; Carnera, A.; Impellizzeri, G.; Boninelli, S.; Priolo, F.; Privitera, V.; Fisicaro, G.; Italia, M.; La Magna, A.; Cuscunà, M.; Fortunato, G.

    2014-02-07

    The diffusion and activation of arsenic implanted into germanium at 40 keV with maximum concentrations below and above the solid solubility (8 × 10{sup 19} cm{sup −3}) have been studied, both experimentally and theoretically, after excimer laser annealing (λ = 308 nm) in the melting regime with different laser energy densities and single or multiple pulses. Arsenic is observed to diffuse similarly for different fluences with no out-diffusion and no formation of pile-up at the maximum melt depth. The diffusion profiles have been satisfactorily simulated by assuming two diffusivity states of As in the molten Ge and a non-equilibrium segregation at the maximum melt depth. The electrical activation is partial and decreases with increasing the chemical concentration with a saturation of the active concentration at 1 × 10{sup 20} cm{sup −3}, which represents a new record for the As-doped Ge system.

  11. Negative charge emission due to excimer laser bombardment of sodium trisilicate glass

    SciTech Connect

    Langford, S.C.; Jensen, L.C.; Dickinson, J.T. ); Pederson, L.R. )

    1990-10-15

    We describe measurements of negative charge emission accompanying irradiation of sodium trisilicate glass (Na{sub 2}O{center dot}3SiO{sub 2}) with 248-nm excimer laser light at fluences on the order of 2 J/cm{sup 2} per pulse, i.e., at the threshold for ablative etching of the glass surface. The negative charge emission consists of a very prompt photoelectron burst coincident with the laser pulse, followed by a much slower plume of electrons and negative ions traveling with a high density cloud of positive ions, previously identified as primarily Na{sup +}. Using combinations of {bold E} and {bold B} fields in conjunction with time-of-flight methods, the negative ions were successfully separated from the plume and tentatively identified as O{sup {minus}}, Si{sup {minus}}, NaO{sup {minus}}, and perhaps NaSi{sup {minus}}. These negative species are probably formed by gas phase collisions in the near-surface region which result in electron attachment.

  12. Laser drilling of nano-pores in sandwiched thin glass membranes.

    PubMed

    Yu, Minrui; Kim, Hyun-Seok; Blick, Robert H

    2009-06-08

    We report on a novel method of using an excimer laser to drill ultra-small pores in borosilicate glass membranes. By introducing a thin layer of liquid between sandwiches of two glass slides, we can shrink the pore size and smoothen the surface on the exit side. We are able to push the minimal exit pore diameter down to 90 nm, well below the laser wavelength of 193 nm. This is achieved with substrates over 150 microm thick. Compared to other methods, this technique is fast, inexpensive, and produces high quality smooth pores.

  13. Comparison of ablation channels created by the ultrapulsed CO2 laser, holmium laser, and 308-nm excimer laser in view of transmyocardial revascularization

    NASA Astrophysics Data System (ADS)

    Sachinopoulou, Anna; Verdaasdonck, Rudolf M.; Beek, Johan F.

    1996-05-01

    The perfusion of hibernating myocardium by oxygenated blood coming from transmyocardial channels to the left ventricular cavity has been considered as an alternative for patients unsuitable for bypass surgery. Channels created by lasers are believed to assure patency in the long term. At this moment, several laser systems have become available to create these channels with minimal thermal effects. The systems should be ECG triggered and the exposure should preferably be within the relaxation phase of the cardiac cycle (0.1 - 0.2 s). The lasers examined were an ultrapulsed carbon-dioxide laser with long focus delivery optics, a Holmium laser coupled to a 1 mm spot fiber and an Excimer laser coupled to a 950 fiber. Pieces of bovine myocardium (10 - 20 mm thickness) were exposed while the displacement during penetration was monitored. Pulse trains were delivered within 0.05 - 0.2 s with a repetition rate of 1 - 3 Hz. The fiber delivery devices were loaded with weights between 10 - 80 gram to study the influence of exerted force. For the carbon dioxide laser the creation of the channels was also recorded on high speed video and with a thermal imaging method in a model tissue to visualize explosive and thermal effects. With the Holmium laser immediate penetration of the fiber was obtained while with the Excimer laser the penetration of the fiber started only after several pulses within the train depending on force and energy. The carbon-dioxide laser beam created a channel instantly, up to 30 mm/pulse depending on spotsize and energy. We conclude that all three lasers are capable of creating a channel of 20 mm long on the heart within a few cardiac cycles. Histologic analysis showed that in contrast to the smooth channels of the carbon-dioxide laser, the Holmium and Excimer laser create irregular channels with ruptures to the sides with some thermal damage. It is not clear which kind of channels will have the best potentials to provide maximum perfusion of the

  14. Photolysis of solid NH3 and NH3-H2O mixtures at 193 nm

    NASA Astrophysics Data System (ADS)

    Loeffler, M. J.; Baragiola, R. A.

    2010-12-01

    We have studied UV photolysis of solid ammonia and ammonia-dihydrate samples at 40 K, using infrared spectroscopy, mass spectrometry, and microgravimetry. We have shown that in the pure NH3 sample, the main species ejected are NH3, H2, and N2, where the hydrogen and nitrogen increase with laser fluence. This increase in N2 ejection with laser fluence explains the increase in mass loss rate detected by a microbalance. In contrast, for the ammonia-water mixture, we see very weak signals of H2 and N2 in the mass spectrometer, consistent with the very small mass loss during the experiment and with a <5% decrease in the NH3 infrared absorption bands spectroscopy after a fluence of ˜3 × 1019 photons/cm2. The results imply that ammonia-ice mixtures in the outer solar system are relatively stable under solar irradiation.

  15. Photoinitiator-free 3D scaffolds fabricated by excimer laser photocuring.

    PubMed

    Farkas, Balázs; Dante, Silvia; Brandi, Fernando

    2017-01-20

    Photoinitiator-free fabrication of poly(ethylene glycol) diacrylate (PEGDA) scaffolds is achieved using a novel three-dimensional (3D) printing method called mask projected excimer laser stereolithography (MPExSL). The spatial resolution of photoinitiator-free curing is suitable for 3D layer-by-layer fabrication with a single layer thickness well controllable at tens to hundreds of microns using 248 nm wavelength for the irradiation. The photoinitiator-free scaffolds are superior compared to their counterparts fabricated by using photoinitiator molecules, showing a higher level of biocompatibility. A release of toxic chemicals from the photoinitiator containing scaffolds is proven by cell proliferation tests. In contrast, no toxic release is found from the photoinitiator-free scaffolds, resulting in the very same level of cell proliferation as the control sample. The demonstration of photoinitiator-free PEGDA scaffolds enables the fabrication of 3D scaffolds with the highest level of biocompatibility for both in vitro and in vivo applications.

  16. Ruthenium Grubbs' catalyst nanostructures grown by UV-excimer-laser ablation for self-healing applications

    NASA Astrophysics Data System (ADS)

    Aïssa, B.; Nechache, R.; Haddad, E.; Jamroz, W.; Merle, P. G.; Rosei, F.

    2012-10-01

    A self healing composite material consisting of 5-Ethylidene-2-Norbornene (5E2N) monomer reacted with Ruthenium Grubbs' Catalyst (RGC) was prepared. First, the kinetics of the 5E2N ring opening metathesis polymerization (ROMP) reaction RGC was studied as a function of temperature. We show that the polymerization reaction is still effective in a large temperature range (-15 to 45 °C), occurring at short time scales (less than 1 min at 40 °C). Second, the amount of RGC required for ROMP reaction significantly decreased through its nanostructuration by means of a UV-excimer laser ablation process. RGC nanostructures of few nanometers in size where successfully obtained directly on silicon substrates. The X-ray photoelectron spectroscopy data strongly suggest that the RGC still keep its original stoichiometry after nanostructuration. More importantly, the associated ROMP reaction was successfully achieved at an extreme low RGC concentration equivalent to (11.16 ± 1.28) × 10-4 Vol.%, occurring at very short time reaction. This approach opens new prospects for using healing agent nanocomposite materials for self-repair functionality, thereby obtaining a higher catalytic efficiency per unit mass.

  17. Photoinitiator-free 3D scaffolds fabricated by excimer laser photocuring

    NASA Astrophysics Data System (ADS)

    Farkas, Balázs; Dante, Silvia; Brandi, Fernando

    2017-01-01

    Photoinitiator-free fabrication of poly(ethylene glycol) diacrylate (PEGDA) scaffolds is achieved using a novel three-dimensional (3D) printing method called mask projected excimer laser stereolithography (MPExSL). The spatial resolution of photoinitiator-free curing is suitable for 3D layer-by-layer fabrication with a single layer thickness well controllable at tens to hundreds of microns using 248 nm wavelength for the irradiation. The photoinitiator-free scaffolds are superior compared to their counterparts fabricated by using photoinitiator molecules, showing a higher level of biocompatibility. A release of toxic chemicals from the photoinitiator containing scaffolds is proven by cell proliferation tests. In contrast, no toxic release is found from the photoinitiator-free scaffolds, resulting in the very same level of cell proliferation as the control sample. The demonstration of photoinitiator-free PEGDA scaffolds enables the fabrication of 3D scaffolds with the highest level of biocompatibility for both in vitro and in vivo applications.

  18. Post-growth annealing of germanium-tin alloys using pulsed excimer laser

    SciTech Connect

    Wang, Lanxiang; Wang, Wei; Zhou, Qian; Yeo, Yee-Chia; Pan, Jisheng; Zhang, Zheng; Tok, Eng Soon

    2015-07-14

    We investigate the impact of pulsed excimer laser anneal on fully strained germanium-tin alloys (Ge{sub 1−x}Sn{sub x}) epitaxially grown on Ge substrate by molecular beam epitaxy. Using atomic force microscopy, X-ray diffraction, transmission electron microscopy, and X-ray photoelectron spectroscopy, the morphological and compositional evolution of Ge{sub 1−x}Sn{sub x} with Sn content up to 17% after annealing using various conditions is studied. Ge{sub 0.83}Sn{sub 0.17} samples annealed at 80 mJ/cm{sup 2} or 150 mJ/cm{sup 2} have no observable changes with respect to the as-grown sample. However, Ge{sub 0.83}Sn{sub 0.17} samples annealed at 250 mJ/cm{sup 2} or 300 mJ/cm{sup 2} have Sn-rich islands on the surface, which is due to Sn segregation in the compressively strained epitaxial film. For Ge{sub 0.89}Sn{sub 0.11}, significant Sn redistribution occurs only when annealed at 300 mJ/cm{sup 2}, indicating that it has better thermal stability than Ge{sub 0.83}Sn{sub 0.17}. A mechanism is proposed to explain the formation of Sn-rich islands and Sn-depleted regions.

  19. Characteristics of excitation discharge of an excimer laser in gas density depletion

    NASA Astrophysics Data System (ADS)

    Imada, Go; Masuda, Wataru; Yatsui, Kiyoshi

    1998-12-01

    The influences of gas density depletion on the highly- repetitive, high-pressure, pulsed glow discharge for excitation of excimer laser have been investigated eliminating the other instabilities, such as shock waves, residual ions, discharge products and electrode heating. The gas density depletion is simulated by utilizing a subsonic flow between the curved electrodes. The comparison has been made on the discharge occurred in the presence of the gas density depletion with the second discharge on the double-pulse experiment. We have found that the big gas density non uniformity, (Delta) (rho) /(rho) 0 approximately 3.6% corresponding to a pulse repetition rate (PRR) of approximately 20 Hz, tends to cause the arc discharge without the shocks, ions, discharge products and electrode heating. On the other hand, the second discharge on the double-pulse experiment becomes arc discharge in much smaller non uniformity ((Delta) (rho) /(rho) 0 approximately 1.2% corresponding to PRR approximately 3 Hz). The arc discharge in the double-pulse experiment might be driven by the residual ions and/or discharge products other than gas density depletion except for PRR greater than 20 Hz.

  20. Excimer Laser Phototherapeutic Keratectomy for the Treatment of Clinically Presumed Fungal Keratitis

    PubMed Central

    Li, Liang-Mao; Zhao, Li-Quan; Qu, Ling-Hui; Li, Peng

    2014-01-01

    This retrospective study was to evaluate treatment outcomes of excimer laser phototherapeutic keratectomy (PTK) for clinically presumed fungal keratitis. Forty-seven eyes of 47 consecutive patients underwent manual superficial debridement and PTK. All corneal lesions were located in the anterior stroma and were resistant to medication therapy for at least one week. Data were collected by a retrospective chart review with at least six months of follow-up data available. After PTK, infected corneal lesions were completely removed and the clinical symptoms resolved in 41 cases (87.2%). The mean ablation depth was 114.39 ± 45.51 μm and diameter of ablation was 4.06 ± 1.07 mm. The mean time for healing of the epithelial defect was 8.8 ± 5.6 days. Thirty-four eyes (82.9%) showed an improvement in best spectacle-corrected visual acuity of two or more lines. PTK complications included mild to moderate corneal haze, hyperopic shift, irregular astigmatism, and thinning cornea. Six eyes (12.8%) still showed progressed infection, and conjunctival flap covering, amniotic membrane transplantation, or penetrating keratoplasty were given. PTK is a valuable therapeutic alternative for superficial infectious keratitis. It can effectively eradicate lesions, hasten reepithelialization, and restore and preserve useful visual function. However, the selection of surgery candidates should be conducted carefully. PMID:24891945

  1. Results of excimer laser photorefractive keratectomy for the correction of myopia at Cedars-Sinai Medical Center: 1993

    NASA Astrophysics Data System (ADS)

    Maguen, Ezra I.; Salz, James J.; Nesburn, Anthony B.; Warren, Cathy; Macy, Jonathan I.; Papaioannou, Thanassis; Hofbauer, John; Berlin, Michael S.

    1994-06-01

    This report summarizes the authors' 3-year experience with excimer laser photorefractive keratectomy (PRK) on 240 eyes of 161 patients. With constant laser emission parameters, nitrogen (N2) flow across the cornea was used on 79 eyes while 161 eyes had no N2 flow. 74 eyes were operated on without fixation with a suction ring. Postoperative pain management included patching and oral analgesics in 77 eyes and the use of topical Diclofenac or Ketorolac, and a therapeutic soft contact lens in 163 eyes. Follow up ranged from 1 month (206 eyes) to 36 months (10 eyes).

  2. Connective tissue growth factor is not necessary for haze formation in excimer laser wounded mouse corneas

    PubMed Central

    Feng, Xiaodi; Pi, Liya; Sriram, Sriniwas; Schultz, Gregory S.

    2017-01-01

    We sought to determine if connective tissue growth factor (CTGF) is necessary for the formation of corneal haze after corneal injury. Mice with post-natal, tamoxifen-induced, knockout of CTGF were subjected to excimer laser phototherapeutic keratectomy (PTK) and the corneas were allowed to heal. The extent of scaring was observed in non-induced mice, heterozygotes, and full homozygous knockout mice and quantified by macrophotography. The eyes from these mice were collected after euthanization for re-genotyping to control for possible Cre-mosaicism. Primary corneal fibroblasts from CTGF knockout corneas were established in a gel plug assay. The plug was removed, simulating an injury, and the rate of hole closure and the capacity for these cells to form light reflecting cells in response to CTGF and platelet-derived growth factor B (PDGF-B) were tested and compared to wild-type cells. We found that independent of genotype, each group of mice was still capable of forming light reflecting haze in the cornea after laser ablation (p = 0.40). Results from the gel plug closure rate in primary cell cultures of knockout cells were not statistically different from serum starved wild-type cells, independent of treatment. Compared to the serum starved wild-type cells, stimulation with PDGF-BB significantly increased the KO cell culture’s light reflection (p = 0.03). Most interestingly, both reflective cultures were positive for α-SMA, but the cellular morphology and levels of α-SMA were distinct and not in proportion to the light reflection seen. This new work demonstrates that corneas without CTGF can still form sub-epithelial haze, and that the light reflecting phenotype can be reproduced in culture. These data support the possibilities of growth factor redundancy and that multiple pro-haze pathways exist. PMID:28207886

  3. Outcomes of excimer laser enhancements in pseudophakic patients with multifocal intraocular lens

    PubMed Central

    Schallhorn, Steven C; Venter, Jan A; Teenan, David; Schallhorn, Julie M; Hettinger, Keith A; Hannan, Stephen J; Pelouskova, Martina

    2016-01-01

    Purpose The aim of this study was to assess visual and refractive outcomes of laser vision correction (LVC) to correct residual refraction after multifocal intraocular lens (IOL) implantation. Patients and methods In this retrospective study, 782 eyes that underwent LVC to correct unintended ametropia after multifocal IOL implantation were evaluated. Of all multifocal lenses implanted during primary procedure, 98.7% were refractive and 1.3% had a diffractive design. All eyes were treated with VISX STAR S4 IR excimer laser using a convectional ablation profile. Refractive outcomes, visual acuities, patient satisfaction, and quality of life were evaluated at the last available visit. Results The mean time between enhancement and last visit was 6.3±4.4 months. Manifest spherical equivalent changed from −0.02±0.83 D (−3.38 D to +2.25 D) pre-enhancement to 0.00±0.34 D (−1.38 D to +1.25 D) post-enhancement. At the last follow-up, the percentage of eyes within 0.50 D and 1.00 D of emmetropia was 90.4% and 99.5%, respectively. Of all eyes, 74.9% achieved monocular uncorrected distance visual acuity 20/20 or better. The mean corrected distance visual acuity remained the same before (−0.04±0.06 logMAR [logarithm of the minimum angle of resolution]) and after LVC procedure (−0.04±0.07 logMAR; P=0.70). There was a slight improvement in visual phenomena (starburst, halo, glare, ghosting/double vision) following the enhancement. No sight-threatening complications related to LVC occurred in this study. Conclusion LVC in pseudophakic patients with multifocal IOL was safe, effective, and predictable in a large cohort of patients. PMID:27175059

  4. Traitement superficiel d'acier par laser excimère

    NASA Astrophysics Data System (ADS)

    Pereira, A.; Cros, A.; Delaporte, Ph.; Marine, W.; Sentis, M.

    2003-06-01

    Motivée par des nécessités économiques et environnementales, l'industrie est amenée à développer de nouveaux procédés propres, notamment pour les applications concernant la préparation de surface (nettoyage, décapage...). Dans ce domaine, l'utilisation du laser excinière présente de nombreux avantages. En effet, en raison d'un temps d'interaction de courte durée (ns), suivi d'un échauffement et d'un refroidissement rapide de la zone irradiée sur une profondeur très fine (μm), il est possible de modifier localement les propriétés physico-chimiques d'une surface sans changer les propriétés intrinsèques du matériau. Le but de nos travaux a consisté en l'étude des effets d'un traitement par laser excimère (XeCI) sur les propriétés chimiques (XPS et AES), structurales (XRD et GIXRD) et morphologiques (MEB) de surface d'acier. Outre le nettoyage de la surface, les analyses chimiques réalisées sur de l'acier ont mis en évidence pour des densités d'énergie importantes la formation d'une couche de Fe2O3 au détriment de FeOOH. Les observations MEB ont révélé la création de structures sphériques nanométriques. Ce traitement permet notamment d'améliorer la tenue à la corrosion de la surface.

  5. Investigation into the interaction of a XeCl excimer laser with hard tissue

    NASA Astrophysics Data System (ADS)

    Murray, Andrea K.; Dickinson, Mark R.

    2000-06-01

    An investigation into the interaction of a fiber deliverable, long pulse, xenon chloride (308 nm) excimer laser with hard biotissue has been carried out. The laser produces pulses of 200+ ns as opposed to around 10 - 20 ns for most of the previously reported data. The threshold of ablation and the maximum ablation depth (AD) in human molar dentine were found to be 0.30 +/- 0.05 J/cm2 and 1.57 +/- 0.04 micrometer/pulse respectively. The threshold for enamel was found to be above the achievable fluence with the available optics. The ablation process was investigated as a function of fluence (approximately 0.1 - 6 J/cm2), pulse repetition rate (PRR) (5 - 25 Hz) and number of pulses (500 - 4000). Each variable was altered independently of the other two. At a constant number of pulses, ablation depth per pulse was found to increase linearly as a function of fluence, up to a saturation fluence of approximately 4 J/cm2. Variation of the PRR alone was found to affect both the ablation threshold and the AD. For constant fluence and PRR, AD decreases non- linearly with an increasing number of pulses. This could be because at high pulse numbers the craters are deep, the walls of the crater absorb more energy and as it is increasingly difficult for the debris to escape, shielding of the tissue occurs. Shielding may also be due to absorption in a luminescent plume. At high fluence and PRR, sharp holes were formed in the dentine although charring was sometimes found around the edges. High PRR also induced considerable mechanical damage.

  6. Treatment of psoriasis and long-term maintenance using 308 nm excimer laser, clobetasol spray, and calcitriol ointment: a case series.

    PubMed

    Wong, Jillian W; Nguyen, Tien V; Bhutani, Tina; Koo, John Y M

    2012-08-01

    Psoriasis is a chronic inflammatory skin disease that is characterized by thickened red plaques covered with silvery scales. Excimer laser therapy is a cutting-edge advancement in UVB phototherapy. In contrast to traditional phototherapy, the 308 nm excimer laser only targets psoriasis plaques, while it spares uninvolved skin. It allows for treatment with a supra-erythmogenic dose of UVB irradiation. Targeted UVB therapy is a possible treatment especially for many who have failed topical treatments, systemic therapy, and traditional phototherapy. For safe and effective psoriasis treatment, a combination of therapies may be used, including a combination of laser treatment with topical medications. We present two cases demonstrating effective treatment with excimer laser in conjunction with clobetasol spray and calcitriol ointment for 12 weeks. Long-term near-clearance of psoriasis was sustained after 6 months and one-year follow up periods without further therapy.

  7. A repetitively pulsed xenon chloride excimer laser with all ferrite magnetic cores (AFMC) based all solid state exciter

    NASA Astrophysics Data System (ADS)

    Benerji, N. S.; Varshnay, N. K.; Ghodke, D. V.; Singh, A.

    2016-10-01

    Performance of repetitively pulsed xenon chloride excimer laser (λ~308 nm) with solid state pulser consisting of magnetic pulse compression circuit (MPC) using all ferrite magnetic cores (AFMC) is reported. Laser system suitable for 100 Hz operation with inbuilt pre-ionizer, compact gas circulation and cooling has been developed and presented. In this configuration, high voltage pulses of ~8 μs duration are compressed to ~100 ns by magnetic pulse compression circuit with overall compression factor of ~80. Pulse energy of ~18 J stored in the primary capacitor is transferred to the laser head with an efficiency of ~85% compared to ~70% that is normally achieved in such configurations using annealed met-glass core. This is a significant improvement of about 21%. Maximum output laser pulse energy of ~100 mJ was achieved at repetition rate of 100 Hz with a typical pulse to pulse energy stability of ±5% and laser pulse energy of 150 mJ was generated at low rep-rate of ~40 Hz. This exciter uses a low current and low voltage solid state switch (SCR) that replaces high voltage and high current switch i. e, thyratron completely. The use of solid state exciter in turn reduces electromagnetic interference (EMI) effects particularly in excimer lasers where high EMI is present due to high di/dt. The laser is focused on a thin copper sheet for generation of micro-hole and the SEM image of the generated micro hole shows the energy stability of the laser at high repetition rate operation. Nearly homogeneous, regular and well developed xenon chloride (XeCl) laser beam spot was achieved using the laser.

  8. New polymers for 193-nm single-layer resists based on substituted cycloolefins/maleic anhydride resins

    NASA Astrophysics Data System (ADS)

    Rushkin, Ilya L.; Houlihan, Francis M.; Kometani, Janet M.; Hutton, Richard S.; Timko, Allen G.; Reichmanis, Elsa; Nalamasu, Omkaram; Gabor, Allen H.; Medina, Arturo N.; Slater, Sydney G.; Neisser, Mark O.

    1999-06-01

    A series of new polymers for 193 nm single layer resist based on maleic anhydride/cycloolefin systems with minimum amount of acrylate units were synthesized. In order to minimize the acrylate content, the cycloolefin moiety of the polymers was functionalized with side groups designed to either promotes adhesion to silicon substrate and/or impart the imaging functionality. All polymers were prepared by free-radical polymerization in moderate to high yields and were characterized by variety of techniques. The initial lithographic evaluation of the new resists was carried out. It was found that acrylates can be successfully replaced with appropriately substituted cycloolefins to provide good resolution. The etch resistance of the new materials generally improves with increase in cycloolefin content. The Onishi and Kunz type plots will be discussed.

  9. Collision-induced desorption in 193-nm photoinduced reactions in (O{sub 2}+CO) adlayers on Pt(112)

    SciTech Connect

    Han Song; Ma Yunsheng; Matsushima, Tatsuo

    2005-09-01

    The spatial distribution of desorbing O{sub 2} and CO{sub 2} was examined in 193-nm photoinduced reactions in O{sub 2}+CO adlayers on stepped Pt (112)=[(s)3(111)x(001)]. The O{sub 2} desorption collimated in inclined ways in the plane along the surface trough, confirming the hot-atom collision mechanism. In the presence of CO(a), the product CO{sub 2} desorption also collimated in an inclined way, whereas the inclined O{sub 2} desorption was suppressed. The inclined O{sub 2} and CO{sub 2} desorption is explained by a common collision-induced desorption model. At high O{sub 2} coverage, the CO{sub 2} desorption collimated closely along the (111) terrace normal.

  10. Analysis of damage threshold of K9 glass irradiated by 248-nm KrF excimer laser

    NASA Astrophysics Data System (ADS)

    Wang, Xi; Shao, Jingzhen; Li, Hua; Nie, Jinsong; Fang, Xiaodong

    2016-02-01

    The theoretical model of K9 glass irradiated by a 248-nm KrF excimer laser was established, and a numerical simulation was performed to calculate temperature and thermal stress fields in the K9 glass sample using the finite element method. The laser-induced damage thresholds were defined and calculated, and the effect of repetition frequency and the number of pulses on the damage threshold were also studied. Furthermore, the experiment research was carried out to confirm the numerical simulation. The damage threshold and damage morphology were analyzed by means of a metallurgical microscope and scanning electron microscopy. The simulation and experimental results indicated that the damage mechanism of K9 glass irradiated by a KrF excimer laser was melting damage and stress damage, and the stress damage first appeared inside the K9 glass sample. The tensile stress damage threshold, the compressive stress damage threshold, and the melting damage threshold were 0.64, 0.76, and 1.05 J/cm2, respectively. The damage threshold decreased with increasing repetition frequency and number of laser pulses. The experimental results indicated that the damage threshold of K9 glass was 2.8 J/cm2.

  11. Preparation of Ultrafine Fe-Pt Alloy and Au Nanoparticle Colloids by KrF Excimer Laser Solution Photolysis.

    PubMed

    Watanabe, Masato; Takamura, Hitoshi; Sugai, Hiroshi

    2009-03-10

    We prepared ultrafine Fe-Pt alloy nanoparticle colloids by UV laser solution photolysis (KrF excimer laser of 248 nm wavelength) using precursors of methanol solutions into which iron and platinum complexes were dissolved together with PVP dispersant to prevent aggregations. From TEM observations, the Fe-Pt nanoparticles were found to be composed of disordered FCC A1 phase with average diameters of 0.5-3 nm regardless of the preparation conditions. Higher iron compositions of nanoparticles require irradiations of higher laser pulse energies typically more than 350 mJ, which is considered to be due to the difficulty in dissociation of Fe(III) acetylacetonate compared with Pt(II) acetylacetonate. Au colloid preparation by the same method was also attempted, resulting in Au nanoparticle colloids with over 10 times larger diameters than the Fe-Pt nanoparticles and UV-visible absorption peaks around 530 nm that originate from the surface plasmon resonance. Differences between the Fe-Pt and Au nanoparticles prepared by the KrF excimer laser solution photolysis are also discussed.

  12. Excimer laser assisted re-oxidation of BaTiO{sub 3} thin films on Ni metal foils

    SciTech Connect

    Bharadwaja, S. S. N. Ko, S. W.; Qu, W.; Clark, T.; Rajashekhar, A.; Motyka, M.; Podraza, N.; Randall, C. A.; Trolier-McKinstry, S.

    2016-01-14

    Excimer laser assisted re-oxidation for reduced, crystallized BaTiO{sub 3} thin films on Ni-foils was investigated. It was found that the BaTiO{sub 3} can be re-oxidized at an oxygen partial pressure of ∼50 mTorr and substrate temperature of 350 °C without forming a NiO{sub x} interface layer between the film and base metal foil. The dielectric permittivity of re-oxidized films was >1000 with loss tangent values <2% at 100 Hz, 30 mV{sub rms} excitation signal. Electron Energy Loss Spectroscopy indicated that BaTiO{sub 3} thin films can be re-oxidized to an oxygen stoichiometry close to ∼3 (e.g., stoichiometric). High resolution cross sectional transmission electron microscopy showed no evidence of NiO{sub x} formation between the BaTiO{sub 3} and the Ni foil upon excimer laser re-oxidation. Spectroscopic ellipsometry studies on laser re-oxidized [001]{sub C} and [111]{sub C} BaTiO{sub 3} single crystals indicate that the re-oxidation of BaTiO{sub 3} single crystals is augmented by photo-excitation of the ozone, as well as laser pulse induced temperature and local stress gradients.

  13. Excimer laser micropatterning of freestanding thermo-responsive hydrogel layers for cells-on-chip applications

    NASA Astrophysics Data System (ADS)

    Santaniello, Tommaso; Martello, Federico; Tocchio, Alessandro; Gassa, Federico; Webb, Patrick; Milani, Paolo; Lenardi, Cristina

    2012-10-01

    We report a novel reliable and repeatable technologic manufacturing protocol for the realization of micro-patterned freestanding hydrogel layers based on thermo-responsive poly-(N-isopropyl)acrylamide (PNIPAAm), which have potential to be employed as temperature-triggered smart surfaces for cells-on-chip applications. PNIPAAm-based films with controlled mechanical properties and different thicknesses (100-300 µm thickness) were prepared by injection compression moulding at room temperature. A 9 × 9 array of 20 µm diameter through-holes is machined by means of the KrF excimer laser on dry PNIPAAm films which are physically attached to flat polyvinyl chloride (PVC) substrates. Machining parameters, such as fluence and number of shots, are optimized in order to achieve highly resolved features. Micro-structured freestanding films are then easily obtained after hydrogels are detached from PVC by gradually promoting the film swelling in ethanol. In the PNIPAAm water-swollen state, the machined holes’ diameter approaches a slight larger value (30 µm) according to the measured hydrogel swelling ratio. Thermo-responsive behaviour and through-hole tapering characterization are carried out by metrology measurements using an optical inverted and confocal microscope setup, respectively. After the temperature of freestanding films is raised above 32 °C, we observe that the shrinkage of the whole through-hole array occurs, thus reducing the holes’ diameter to less than a half its original size (about 15 µm) as a consequence of the film dehydration. Different holes’ diameters (10 and 30 µm) are also obtained on dry hydrogel employing suitable projection masks, showing similar shrinking behaviour when hydrated and undergone thermo-response tests. Thermo-responsive PNIPAAm-based freestanding layers could then be integrated with other suitable micro-fabricated thermoplastic components in order to preliminary test their feasibility in operating as temperature

  14. Numerical analysis of excimer laser-induced breakdown of Kr gas

    NASA Astrophysics Data System (ADS)

    Hamam, Kholoud A.; Elsayed, Khaled A.; Gamal, Yosr E. E.

    2017-03-01

    The present paper displays a numerical study on the role of electron dynamics in relation to the dependence of the threshold intensity on the pressure in the breakdown of gases by laser radiation. The analysis aimed to find out the origin of the steep slope observed in the measurements of threshold intensity against gas pressure in the breakdown of Kr induced by an excimer laser source (Opt. Commun. 13:66-68, 1). The experiment was carried out using wavelength 248 nm and pulse width of 18 ns for a gas pressure range 4.5-300 torr. The investigation centered on an adaptation of our previously developed electron cascade model given in Evans and Gamal (J. Phys. D Appl. Phys. 13:1447-1458, 2). This model solves numerically a time-dependent energy equation simultaneously with a set of rate equations that describe the change of the population of the formed excited states. The modifications introduced into the model the realistic structure of the krypton gas atom as well as electron diffusion as a loss process to inspect the experimentally tested low-pressure regime. A computer program is undertaken to determine the breakdown threshold intensity as a function of gas pressure. Reasonable agreement is obtained between the calculated thresholds and measured ones, corresponding to the examined pressure range. This agreement validates the applicability of the model. The relationship between the role of the physical mechanisms and gas pressure is studied by analyzing the EEDF and its parameters at selected pressure values that cover the experimentally tested range. The result of this study clarified that electron diffusion out of the focal region is responsible for the steep slope of the threshold intensities for pressures <75 torr. For higher pressures (75-300 torr), collisional excitation of ground-state atoms followed by their ionization via multiphoton and collisional processes acts to convert the Kr gas in the interaction region into the state of breakdown. Investigation of

  15. Time-resolved diagnostics of excimer laser-generated ablation plasmas used for pulsed laser deposition

    SciTech Connect

    Geohegan, D.B.

    1994-09-01

    Characteristics of laser plasmas used for pulsed laser deposition (PLD) of thin films are examined with four in situ diagnostic techniques: Optical emission spectroscopy, optical absorption spectroscopy, ion probe studies, and gated ICCD (intensified charge-coupled-device array) fast photography. These four techniques are complementary and permit simultaneous views of the transport of ions, excited states, ground state neutrals and ions, and hot particulates following KrF laser ablation of YBCO, BN, graphite and Si in vacuum and background gases. The implementation and advantages of the four techniques are first described in order to introduce the key features of laser plasmas for pulsed laser deposition. Aspects of the interaction of the ablation plume with background gases (i.e., thermalization, attenuation, shock formation) and the collision of the plasma plume with the substrate heater are then summarized. The techniques of fast ICCD photography and gated photon counting are then applied to investigate the temperature, velocity, and spatial distribution of hot particles generated during KrF ablation of YBCO, BN, Si and graphite. Finally, key features of fast imaging of the laser ablation of graphite into high pressure rare gases are presented in order to elucidate internal reflected shocks within the plume, redeposition of material on a surface, and formation of hot nanoparticles within the plume.

  16. Excimer laser annealing to fabricate low cost solar cells. Quarterly technical report No. 1, 26 March-30 June 1984

    SciTech Connect

    Not Available

    1984-07-01

    The objective of this research is to show whether or not pulsed excimer laser annealing (PELA) of ion-implanted junctions is a cost effective replacement for diffused junctions in fabricating crystalline silicon solar cells. The preliminary economic analysis completed during the first quarter of this program shows that the use of PELA to fabricate both the front junction and back surface field (BSF) would cost approximately 35 cents per peak watt (Wp), compared to a cost of 15 cents/Wp for diffusion, aluminum BSF and an extra cleaning step in the baseline process described by JPL. The cost advantage of the PELA process depends on improving the average cell efficiency from 14% to 16%, which would lower the overall cost of the module by about 15 cents/Wp. The technical goal of this research is to develop an optimized PELA process compatible with commercial production, and to demonstrate increased cell efficiency with sufficient product for adequate statistical analysis. During the first quarter of this program an excimer laser annealing station was set-up and made operational. The first experiment used 248 nm radiation to anneal phosphorus implants in polished and texture-etched silicon. Preliminary results showed that the PELA processed cells had overall efficiencies comparable to furnace annealed ion implanted controls, and that texture-etched material requires lower fluence for annealing than polished silicon. Process optimization will be carried out in the second quarter.

  17. Revisiting the mechanisms involved in Line Width Roughness smoothing of 193 nm photoresist patterns during HBr plasma treatment

    SciTech Connect

    Brihoum, M.; Ramos, R.; Menguelti, K.; Cunge, G.; Pargon, E.; Joubert, O.

    2013-01-07

    HBr plasma treatments are widely used in nanoscale lithographic technologies to increase the plasma etch resistance of 193 nm photoresist masks as well as to decrease their Line Width Roughness (LWR). VUV irradiation of the photoresist is known to play a major role in this process by inducing polymer chains rearrangement and finally LWR reduction. However, in the plasma environment (i.e., with radical and ion bombardment), the interaction layer formed at the resist surface perturbs this mechanism and a lower LWR reduction is achieved compared to VUV only treatment. So far the nature of the interaction layer, its formation mechanism and its relation with the resist pattern LWR were all unclear. In this paper, we show that a graphite-like layer is formed on the resist patterns by the redeposition of carbon-based species originating from the plasma dissociation of outgassed photo-etched resist moieties. We show that the presence of this layer inhibits the LWR minimization and causes an increase in the LWR when it becomes thick enough (i.e., a few nanometers). We present evidences that the difference in the mechanical properties of the graphite-like top layer which coats the resist patterns and the bulk of the resist patterns is correlated to the LWR after plasma treatment. We can conclude that the optimization of an HBr cure process relies on the minimization of the carbon redeposition while keeping a significant VUV light flux and we show that this can be achieved by using pulsed plasma processes.

  18. Performance of a high-NA dual-stage 193-nm TWINSCAN Step and Scan system for 80-nm applications

    NASA Astrophysics Data System (ADS)

    de Klerk, Jos; Jorritsma, Louis; van Setten, Eelco; Droste, Richard; du Croo de Jongh, Richard; Hansen, Steven G.; Smith, Dan; van de Kerkhof, Mark A.; van de Mast, Frank; Graeupner, Paul; Rohe, Thomas; Kornitzer, Klaus

    2003-06-01

    As the semiconductor industry looks into the near future to extend manufacturing beyond 100nm, a new optical lithography system was developed by ASML. To achieve the aggressive industry roadmap and enable high volume manufacturing of sub 100nm resolutions at low k1 requires a number of challenges to be overcome. This paper reviews the design, system performance and measurements of a High NA, Dual stage 193nm TWINSCAN system planned for high volume manufacturing for 80nm applications. The overall system capability to effectively measure and control to a high precision the various attributes upon process control necessary for adequate CD control, in the low k1 regime will be shown. This paper will discuss the needed imaging control and the requirement for an extremely stable and matured platform. The system's dynamic, focus, leveling and dose delivery performance will be shown. Additionally, the automated control features of the optical system will be shown that enable the use of the various resolution enhancement techniques (RET) currently under development. The ability to optimize imaging performance with the control and flexibility in the pupil formation optics will be discussed. Finally, experimental results of an in-situ measurement technique with automated feedback control to optimize projection lens aberrations, which has a direct impact to imaging fidelity, will be shown. In summary, the lithographic system functionality and performance needed to achieve 80nm volume manufacturing will be presented.

  19. High-performance 193-nm photoresist materials based on a new class of polymers containing spaced ester finctionalities

    NASA Astrophysics Data System (ADS)

    Khojasteh, Mahmoud; Chen, K. Rex; Kwong, Ranee W.; Lawson, Margaret C.; Varanasi, Pushkara R.; Patel, Kaushal S.; Kobayashi, Eiichi

    2003-06-01

    ArF lithography has been selected as the imaging method for the 90 nm technology node. Manufacturing related issues will have to be addressed when designing advanced 193 nm resists that are production worthy. Post exposure bake (PEB) sensitivity, dissolution properties and process window are some issues that need continuous improvement. Initially our investigation focused on a cyclic olefin (CO) platform which led us to a better understanding of the relationship between polymer structure and physical properties and how to improve cyclic olefin resist performance. Since then we have developed a new class of acrylate polymers with pendant "spaced ester" functionality. We have investigated the potential use of "spaced ester" functionality on improving the lithographic performance of CO and acrylate resist platforms. We have found that with "spaced ester" as pending group in CO polymer structures, it can lower the Tg and improve the dissolution properties of the CO resists. Resists formulated with acrylate containing "spaced ester" group exhibit excellent PEB temperature sensitivity (1 nm/°C), and are soluble in PGMEA. In addition, we have demonstrated sub-100 nm resolution with excellent process window through formulation optimization for acrylate based resists. This paper will focus on the "spaced ester" based polymer design, material properties; resist characteristics, and the lithographic performance for logic dense line applications.

  20. Extension of 193 nm dry lithography to 45-nm half-pitch node: double exposure and double processing technique

    NASA Astrophysics Data System (ADS)

    Biswas, Abani M.; Li, Jianliang; Hiserote, Jay A.; Melvin, Lawrence S., III

    2006-10-01

    Immersion lithography and multiple exposure techniques are the most promising methods to extend lithography manufacturing to the 45nm node. Although immersion lithography has attracted much attention recently as a promising optical lithography extension, it will not solve all the problems at the 45-nm node. The 'dry' option, (i.e. double exposure/etch) which can be realized with standard processing practice, will extend 193-nm lithography to the end of the current industry roadmap. Double exposure/etch lithography is expensive in terms of cost, throughput time, and overlay registration accuracy. However, it is less challenging compared to other possible alternatives and has the ability to break through the κ I barrier (0.25). This process, in combination with attenuated PSM (att-PSM) mask, is a good imaging solution that can reach, and most likely go beyond, the 45-nm node. Mask making requirements in a double exposure scheme will be reduced significantly. This can be appreciated by the fact that the separation of tightly-pitched mask into two less demanding pitch patterns will reduce the stringent specifications for each mask. In this study, modeling of double exposure lithography (DEL) with att-PSM masks to target 45-nm node is described. In addition, mask separation and implementation issues of optical proximity corrections (OPC) to improve process window are studied. To understand the impact of OPC on the process window, Fourier analysis of the masks has been carried out as well.

  1. Analysis of KrF excimer laser beam modification resulting from ablation under closed thick film flowing filtered water

    NASA Astrophysics Data System (ADS)

    Dowding, Colin; Lawrence, Jonathan

    2011-09-01

    The application of a closed thick film flowing filtered water to immerse the ablation etching mechanism of an excimer laser poses interesting possibilities concerning debris control, modification of machined feature topography and modification of the ablation rate. Furthermore, these parameters have been shown to be dependent on flow velocity; hence, offering further user control of machining characteristics. However, the impact of this technique requires investigation. This contribution offers comparison of the calculated ablation pressure and the effect on feature surface characteristics given for laser ablation of bisphenol A polycarbonate using KrF excimer laser radiation in ambient air against laser ablation of the same substrate under closed thick film flowing filtered water immersion. Also, an impact of such immersion equipment on the optical performance of the micromachining centre used is quantified and reviewed. The pressure is calculated to have risen by a magnitude of 48, when using the liquid immersed ablation technique. This increase in pressure is proposed to have an increased surface roughness, promoting the number of asperities with a surface area lower than 16 μm 2; resulting in a diffuse reflection of light and an apparent darkening of features. The focal length of the optical system was accurately predicted to increase by 2.958 mm, when using the closed flowing liquid immersion equipment. This equipment is predicted to have increased the optical depth of focus via reduction in the angle of convergence of the two defining image rays; yet the perceived focus, measured discretely by mean feature wall angle, was found to be 25% smaller when using the closed thick film flowing filtered water immersion technique instead of similar laser ablation in ambient air. A compressed plume interaction is proposed as a contributing factor in this change.

  2. Effect of beam variables on corneal sensitivity after excimer laser photorefractive keratectomy

    PubMed Central

    Lawrenson, J.; Corbett, M.; O'Brart, D.; Marshall, J.

    1997-01-01

    AIM—To investigate changes in corneal touch sensitivity following excimer laser photorefractive keratectomy (PRK) using different beam configurations.
METHODS—20 subjects were given a unilateral −3.00 D correction with either a 5 mm (26 µm, n=10) or 6 mm (42 µm, n=10) beam diameter. Thirty subjects underwent a unilateral −6.00 D correction with 5 mm (62 µm, n=10), 6 mm (78 µm, n=10), or multizone (62 µm, n=10) treatments. The multizone treatment was 6 mm in diameter with the depth of the 5 mm treatment. Corneal sensitivity was measured using a slit-lamp mounted Cochet-Bonnet aesthesiometer before and at 1, 3, 6, and 12 months after PRK. Stimulus locations included points lying within the ablated zone (central) and outside (peripheral). These were compared with the equivalent locations in control (untreated) eyes.
RESULTS—There was a significant reduction in corneal sensitivity within the central (ablated) zone in all treatment groups after PRK. In most groups a return to full sensitivity was achieved by 6 months with the exception of the multizone treatment group which showed significant corneal hypoaesthesia at 12 months. Peripheral corneal sensitivity was also reduced in this group up to 3 months after the procedure. A comparison between the −3.00 D and −6.00 D treatment groups showed no significant difference. However, combining data from all treatment groups, a significant correlation was found between the interocular difference in central corneal sensitivity and postoperative haze at 3 and 6 months.
CONCLUSIONS—For corrections up to −6.00 D ablation depth and treatment zone diameter do not appear to be clinically important determinants of corneal hypoaesthesia. In contrast, postoperative corneal haze appears to correlate with sensitivity loss.

 PMID:9349159

  3. Analyzing velocity map images to distinguish the primary methyl photofragments from those produced upon C-Cl bond photofission in chloroacetone at 193 nm

    SciTech Connect

    Alligood, Bridget W.; Straus, Daniel B.; Butler, Laurie J.

    2011-07-21

    We use a combination of crossed laser-molecular beam scattering experiments and velocity map imaging experiments to investigate the three primary photodissociation channels of chloroacetone at 193 nm: C-Cl bond photofission yielding CH{sub 3}C(O)CH{sub 2} radicals, C-C bond photofission yielding CH{sub 3}CO and CH{sub 2}Cl products, and C-CH{sub 3} bond photofission resulting in CH{sub 3} and C(O)CH{sub 2}Cl products. Improved analysis of data previously reported by our group quantitatively identifies the contribution of this latter photodissociation channel. We introduce a forward convolution procedure to identify the portion of the signal, derived from the methyl image, which results from a two-step process in which C-Cl bond photofission is followed by the dissociation of the vibrationally excited CH{sub 3}C(O)CH{sub 2} radicals to CH{sub 3}+ COCH{sub 2}. Subtracting this from the total methyl signal identifies the methyl photofragments that result from the CH{sub 3}+ C(O)CH{sub 2}Cl photofission channel. We find that about 89% of the chloroacetone molecules undergo C-Cl bond photofission to yield CH{sub 3}C(O)CH{sub 2} and Cl products; approximately 8% result in C-C bond photofission to yield CH{sub 3}CO and CH{sub 2}Cl products, and the remaining 2.6% undergo C-CH{sub 3} bond photofission to yield CH{sub 3} and C(O)CH{sub 2}Cl products.

  4. Effect of laser radiation wavelength and reepithelization process on optical quality of eye cornea after laser correction of vision

    SciTech Connect

    Kitai, M S; Semchishen, A V; Semchishen, V A

    2015-10-31

    The optical quality of the eye cornea surface after performing the laser vision correction essentially depends on the characteristic roughness scale (CRS) of the ablated surface, which is mainly determined by the absorption coefficient of the cornea at the laser wavelength. Thus, in the case of using an excimer ArF laser (λ = 193 nm) the absorption coefficient is equal to 39000 cm{sup -1}, the darkening by the dissociation products takes place, and the depth of the roughness relief can be as large as 0.23 mm. Under irradiation with the Er : YAG laser (λ = 2940 nm) the clearing is observed due to the rupture of hydrogen bonds in water, and the relief depth exceeds 1 μm. It is shown that the process of reepithelization that occurs after performing the laser vision correction leads to the improvement of the optical quality of the cornea surface. (interaction of laser radiation with matter)

  5. A Comparison of Excimer Laser Microprobe (U-Th)/He and Conventional Laser-Heating (U-Th)/He Thermochronometry

    NASA Astrophysics Data System (ADS)

    Boyce, J. W.; Hodges, K. V.; Olszewski, W. J.; Jercinovic, M. J.; Carpenter, B.; Reiners, P. W.

    2005-12-01

    Recent advances in Excimer laser ablation (U-Th)/He thermochronology (ExLA-(U-Th)/He) of monazite have demonstrated the potential of the technique with regard to generating precise cooling age information while dealing with parent element zoning, inclusions and avoiding the alpha ejection correction and the uncertainty therein [1]. ExLA-(U-Th)/He age determinations consist of three independent measurements: 1) Moles of He, 2) Ablated volume, and 3) Parent element (U, Th, Sm) concentrations. After samples are polished, an Excimer laser is used to drill a 10-250 μm diameter hole in the surface, liberating radiogenic helium which is then quantified by isotope dilution. The volume of the hole is then measured by an ADE-Phase Shift MicroXAM vertical scanning interferometer, allowing us to calculate He concentration. U, Th, and Sm concentrations are obtained (in the case of monazite), by electron microprobe analysis (either before or after helium analysis). While the precision of the technique has been adequately demonstrated on monazites as young as ~700 ka [1,2], the question of accuracy has to this point been unanswered because of the lack of a suitable monazite (U-Th)/He standard amenable to conventional (U-Th)/He analysis for comparison. Typical natural monazites are very small and strongly zoned, resulting in large and poorly constrained alpha-recoil corrections, and therefore conventional (U-Th)/He ages with unacceptably large uncertainties. Eighteen ExLA-(U-Th)/He ages on a polished section of the centimeter-sized, gem-quality Brazilian monazite MOM1 yield an error-weighted mean of 447.4 ± 3.4 Ma (0.75% at two standard errors from the mean or 2SE). Ten additional 25 μm spot analyses on a small fragment of a second crystal (MOM3) result a similar weighted mean age, albeit with more scatter, of 454.6 ± 8.9 Ma (2.0% at 2SE). Taken together, the 28 ExLA-(U-Th)/He analyses on the two crystals can be used to calculate one age of 450.4 ± 3.9 Ma (0.86% at 2SE). The

  6. AFM study of excimer laser patterning of block-copolymer: Creation of ordered hierarchical, hybrid, or recessed structures

    NASA Astrophysics Data System (ADS)

    Švanda, Jan; Siegel, Jakub; Švorčík, Vaclav; Lyutakov, Oleksiy

    2016-05-01

    We report fabrication of the varied range of hierarchical structures by combining bottom-up self-assembly of block copolymer poly(styrene-block-vinylpyridine) (PS-b-P4VP) with top-down excimer laser patterning method. Different procedures were tested, where laser treatment was applied before phase separation and after phase separation or phase separation and surface reconstruction. Laser treatment was performed using either polarized laser light with the aim to create periodical pattern on polymer surface or non-polarized light for preferential removing of polystyrene (PS) part from PS-b-P4VP. Additionally, dye was introduced into one part of block copolymer (P4VP) with the aim to modify its response to laser light. Resulting structures were analyzed by XPS, UV-vis and AFM techniques. Application of polarized laser light leads to creation of structures with hierarchical, recessed or hybrid geometries. Non-polarized laser beam allows pronouncing the block copolymer phase separated structure. Tuning the order of steps or individual step conditions enables the efficient reorientation of block-copolymer domain at large scale, fabrication of hierarchical, hybrid or recessed structures. The obtained structures can find potential applications in nanotechnology, photonics, plasmonics, information storage, optical devices, sensors and smart surfaces.

  7. Single pulse vibrational Raman scattering by a broadband KrF excimer laser in a hydrogen-air flame

    NASA Technical Reports Server (NTRS)

    Pitz, Robert W.; Wehrmeyer, Joseph A.; Bowling, J. M.; Cheng, Tsarng-Sheng

    1990-01-01

    Spontaneous vibrational Raman scattering (VRS) is produced by a broadband excimer laser at 248 nm (KrF) in a H2-air flame, and VRS spectra are recorded for lean, stoichiometric, and rich flames. Except at very lean flame conditions, laser-induced fluorescence (LIF) processes interfere with VRS Stokes lines from H2, H2O, and O2. No interference is found for the N2 Stokes and N2 anti-Stokes lines. In a stoichiometric H2/air flame, single-pulse measurements of N2 concentration and temperature (by the VRS Stokes to anti-Stokes ratio) have a relative standard deviation of 7.7 and 10 percent, respectively. These single pulse measurement errors compare well with photon statistics calculations using measured Raman cross sections.

  8. <100>-textured self-assembled square-shaped polycrystalline silicon grains by multiple shot excimer laser crystallization

    SciTech Connect

    He Ming; Ishihara, Ryoichi; Metselaar, Wim; Beenakker, Kees

    2006-10-15

    Strong preference for <100> surface and in-plane orientations has been observed in polycrystalline silicon film on SiO{sub 2} after crystallization with multiple excimer laser pulses. Laser induced periodic surface structure (LIPSS) is developed in the film, constructing self-assembled square-shaped grains. The clear texture can be observed in a relatively wide energy density window, from 250 to 275 mJ/cm{sup 2}, for a 30 nm thick {alpha}-Si layer. It is speculated that the lateral growth velocity of <100>-oriented grains is the fastest, and the orthogonal in-plane <100> directions are developed due to the alternate directions of melting and solidification during the LIPSS formation.

  9. An open label pilot study of supraerythemogenic excimer laser in combination with clobetasol spray and calcitriol ointment for the treatment of generalized plaque psoriasis.

    PubMed

    Levin, Ethan; Nguyen, Catherine M; Danesh, Melissa J; Beroukhim, Kourosh; Leon, Argentina; Koo, John

    2016-01-01

    A common therapeutic modality for psoriasis includes the combination of phototherapy with topical treatments. The recent development of targeted phototherapy with the excimer laser and spray formulations for topical treatments has increased the efficacy and convenience of these combinational therapies. Herein, we aim to assess the efficacy of a novel combination of therapies using the 308 nm excimer laser, clobetasol propionate spray and calcitriol ointment for the treatment of moderate to severe generalized psoriasis. In this 12-week study, patients with moderate to severe psoriasis received twice weekly treatments with a 308-nm excimer laser combined with clobetasol proprionate twice daily for a month followed by calcitriol ointment twice daily for the next month. Of the 30 patients enrolled, 83% of patients (25/30) achieved PASI-75 [65-94%, 95% confidence interval (CI)] at week 12. For PGA, there was an estimated decrease of 3.6 points (3.1-4.1, 95% CI, p < 0.0005) by week 12. In conclusion, the combination of excimer laser with alternating clobetasol and calcitriol application has shown to be a promising combination of therapies for the treatment of moderate to severe generalized psoriasis. Further evaluation may be conducted with a larger study inclusive of control groups and head-to-head comparisons against topical steroid and UVB therapy as monotherapies.

  10. KrF- and ArF-excimer-laser-induced absorption in silica glasses produced by melting synthetic silica powder

    SciTech Connect

    Kuzuu, Nobu; Sasaki, Toshiya; Kojima, Tatsuya; Tanaka, Jun-ichiro; Nakamura, Takayuki; Horikoshi, Hideharu

    2013-07-07

    KrF- and ArF-excimer-laser-induced absorption of silica glasses produced by electric melting and flame fusion of synthetic silica powder were investigated. The growth of KrF-laser-induced absorption was more gradual than that of ArF-laser-induced absorption. Induced absorption spectra exhibited a peak at about 5.8 eV, of which the position and width differed slightly among samples and laser species. Widths of ArF-laser-induced absorption spectra were wider than those of KrF-laser-induced spectra. KrF-laser-induced absorption is reproducible by two Gaussian absorption bands peaking at 5.80 eV with full width at half maximum (FWHM) of 0.62 eV and at 6.50 eV with FWHM of 0.74 eV. For reproduction of ArF-laser-induced absorption, Gaussian bands at 5.41 eV with FWHM of 0.62 eV was necessary in addition to components used for reproducing KrF-laser-induced absorption. Based on the discussion of the change of defect structures evaluated from change of absorption components, we proposed that the precursor of the 5.8-eV band ascribed to E Prime center ({identical_to}Si{center_dot}) is {identical_to}Si-H HO-Si{identical_to} structures formed by the reaction between strained Si-O-Si bonds and interstitial H{sub 2} molecules during the irradiation.

  11. Non-Uniform Distribution of Defects and Effects of Excimer Laser Radiation on Bulk Silica and Optical Fibers

    NASA Astrophysics Data System (ADS)

    Kannan, Sriraman

    The presence of defects in bulk silica and optical fibers, their distribution and the subsequent effect of ultraviolet excimer laser on their properties are the subjects of this research. Bulk silica rods manufactured by different methods which varied with respect to water content and oxygen stoichiometry were selected for the study. Absorbance and luminescence measurements were made in the UV and visible regions of the spectrum, which revealed the presence of an absorption band centered at about 5 eV (248 nm) in certain types of low water content silica. The presence of absorption bands and the effect of 248 nm excimer laser irradiation are presented and discussed for these latter samples as well as silicas of moderate to high water content. Investigations were carried out in the fiber form, which yielded results in conformity with the conclusions derived from studies on bulk silica, with respect to issues relating to the oxygen stoichiometry, water content and laser radiation effects. In addition, the draw induced 630 nm absorption band was also observed in certain types of fibers and results pertaining to this aspect are also presented. For the first time, spatially variant emissions generated by UV laser radiation in fluorine doped silica clad fibers with pure silica cores were reported through this work. Spatial and spectral correlations are made and the defects contributing to the various emissions are identified for each fiber type. Longitudinal effects observed in fibers with oxygen deficient cores are also presented and discussed. High sensitivity X-band electron spin resonance (ESR) experiments were carried out on different types of fibers, to probe into the origins of the spatially variant luminescence recorded in the laser irradiation studies. The fibers were successively etched down to lower diameters and ESR measurements were carried out at each step at low temperatures (typically at 110 K). By this cross-sectional profiling of the ESR defect signals

  12. Coaxial Measurement of the Translational Distribution of CS Produced in the Laser Photolysis of CS2 at 193nm.

    DTIC Science & Technology

    1983-11-04

    IKasakawi, and R. Bersohn, J. Chemn. Phys. 72, 4058 (1980). *2. M.C. Addison, C.D. Bryne and R.J. Donovan, Chem. Phys. Letters, 64, 57 (1979). *3. J.E...population of CS2 fragments produced in processes: (a). CS2- + hV CS ( Z ,v" ) + S (3p) represented by 0; (b). CS2 + hv CS (X1 Z +,v") + S (1D...0 0 1 1 1 fl l i 0 z 0 - >0 -) p ~m 0 z D:O m l CCD X CA > 0__ -" -’ o- o 0 -0 "C 0 o 00 CL CL 0 0 -." - ’ .:.-:.- "- * -.5

  13. Electronic and crystalline structure of Si/SiO 2 interface modified by ArF excimer laser

    NASA Astrophysics Data System (ADS)

    Cháb, V.; Lukeš, I.; Ondřejček, M.; Jiříček, P.

    The native oxide layers on Si(100) surface were irradiated under UHV conditions by an ArF excimer laser pulses with energy density varied between melting and evaporating thresholds. The resulting changes were studied by LEED, AES and UPS. The increase of the energy density up to evaporation threshold results in the recrystallisation of native oxide layer. The pulses with energy densities just above the evaporation threshold ablate the top layer leaving an ordered and atomicaly clean surface. The observed (1x1) surface reconstruction is probably stabilised by strains introduced during rapid melting and quenching of the topmost layers. The surface electronic structure is dominated by random satisfaction of dangling bonds swearing a well defined surface states observed on (2x1)Si(100) surface.

  14. Direct carbide synthesis by multipulse excimer laser treatment of Ti samples in ambient CH4 gas at superatmospheric pressure

    NASA Astrophysics Data System (ADS)

    Mihailescu, I. N.; Chitica, N.; Teodorescu, V. S.; Popescu, M.; De Giorgi, M. L.; Luches, A.; Perrone, A.; Boulmer-Leborgne, Ch.; Hermann, J.; Dubreuil, B.; Udrea, S.; Barborica, A.; Iova, I.

    1994-05-01

    Successful carbidation of Ti in a layer forming on the surface of a Ti sample submitted to multipulse excimer (λ=308 nm) laser treatment in CH4 at a slightly superatmospheric pressure is reported. The layer is only surface contaminated with oxygen while its main part consists of fcc TiC. The layer apparently ends with a tail of carbides with low C content, extending deeper into the sample's bulk. The characteristics of the synthesized layer are suggested to be related to the peculiarities of the chemical synthesis which are enhanced by gas propulsion into a melted layer under the recoil action of a plasma evolving in front of the sample. A cavitation mechanism inside the melted surface layer in order to account for plasma initiation is proposed. This mechanism also facilitates the strong substance propulsion into the sample's bulk.

  15. [Narrowband UV-B, monochromatic excimer laser, and photodynamic therapy in psoriasis: a consensus statement of the Spanish Psoriasis Group].

    PubMed

    Carrascosa, J M; López-Estebaranz, J L; Carretero, G; Daudén, E; Ferrándiz, C; Vidal, D; Belinchón, I; Sánchez-Regaña, M; Puig, L

    2011-04-01

    Novel treatment strategies and new information concerning the management of moderate to severe psoriasis justify a reassessment of the role of the classic therapies in this setting. This consensus statement evaluates narrowband UV-B therapy, which is currently considered the phototherapy option of choice in psoriasis because of its risk-to-benefit ratio. The role of excimer laser and photodynamic therapies are also discussed. These targeted therapies are still only available in a small number of centers in Spain and are used principally in the treatment of localized and recalcitrant forms of psoriasis. We discuss the efficacy and safety of phototherapy as well as treatment regimens, combination therapy, and clinical considerations relating to the characteristics of the patient or the disease.

  16. Laser radiation at various wavelengths for decompression of intervertebral disk. Experimental observations on human autopsy specimens.

    PubMed

    Choy, D S; Altman, P A; Case, R B; Trokel, S L

    1991-06-01

    The interaction of laser radiation with the nucleus pulposus from autopsy specimens of human intervertebral disks was evaluated at different wavelengths (193 nm, 488 nm & 514 nm, 1064 nm, 1318 nm, 2150 nm, 2940 nm, and 10600 nm). A significant correlation of linear least squares fit of the mass ablated as a function of incident energy was found for all lasers used except the Excimer at 193 nm. The 2940-nm Erbium:YAG laser was most efficient in terms of mass of disk ablated per joule in the limited lower range where this wavelength was observed. At higher energy levels, the CO2 laser in the pulsed mode was most efficient. However, the Nd:YAG 1064-nm and 1318-nm lasers are currently best suited for percutaneous laser disk decompression because of the availability of usable waveguides. Carbonization of tissue with the more penetrating Nd:YAG 1064-nm laser increases the efficiency of tissue ablation and makes it comparable to the Nd:YAG 1318-nm laser.

  17. Excimer laser ablation before autoperfusion balloon inflation: a novel therapeutic approach to high grade stenoses in vessels supplying substantial myocardium at risk.

    PubMed

    Krause, P B; Schaer, G L; Parrillo, J E; Klein, L W

    1992-11-01

    The utility of a novel approach employing excimer laser ablation to form a channel for subsequent autoperfusion balloon angioplasty is presented. Two important advantages of this strategy are highlighted: (1) applicability to severe stenoses in vessels supplying substantial myocardium at risk and (2) ability to allow prolonged inflation time to minimize procedure related ischemia and optimize revascularization of the heart. We prospectively selected and studied five patients and performed excimer laser coronary angioplasty using either a 1.3 mm or 1.6 mm laser catheter followed by autoperfusion balloon dilatation. Procedural success was documented by a significant reduction in mean percent diameter stenosis from 89 +/- 4% (S.D.) to 53 +/- 4% after laser angioplasty (p < 0.0001) and subsequently to 20 +/- 4% after autoperfusion balloon angioplasty (p < 0.0001). Clinical success was attained and characterized by resolution of anginal symptoms for at least 4 weeks after hospital discharge. There were no major acute complications encountered; however, restenosis has occurred in 2 out of 5 patients. We therefore recommend this novel pre-dilation strategy with excimer laser followed by autoperfusion balloon angioplasty in selected patients with an extensive amount of myocardium at risk.

  18. Effect of KrF Pulsed Excimer Laser Treatment on Surface Microstructure of Al-Si Alloy

    NASA Astrophysics Data System (ADS)

    Mahanty, S.; Gouthama

    2016-11-01

    In the present research, the Al-Si alloy surface is treated by KrF excimer pulse laser for different number of laser pulses in ambient condition at energy 4.75 J/cm2. The surface microstructural characterization was done by the optical microscope, in situ video recording during laser pulsing, SEM and TEM. The fretting wear test was undertaken to assess the tribological behavior. In situ video recording showed changes in the surface reflectivity with the number of pulses which is related to progressive changes in the surface compositional homogeneity. After ten pulses, signs of rippled structure were observed. The 15 pulse samples showed star-like morphological feature at the central region. The TEM observations showed high density of stacking faults/twins in Si after first pulse treatment. After 15 pulses, nano-crystalline Si precipitates in the size range <5 nm are seen to be homogeneously distributed. A cellular structure with the cell size <100 nm formed in the matrix. These cell boundaries were decorated with the Si nanocrystals. A positive effect in wear resistance property is observed after the 15 pulses treatment.

  19. The next-generation ArF excimer laser for multiple-patterning immersion lithography with helium free operation

    NASA Astrophysics Data System (ADS)

    Miyamoto, Hirotaka; Kumazaki, Takahito; Tsushima, Hiroaki; Kurosu, Akihiko; Ohta, Takeshi; Matsunaga, Takashi; Mizoguchi, Hakaru

    2016-03-01

    Multiple patterning ArF immersion lithography has been expected as the promising technology to satisfy tighter leading edge device requirements. A new ArF excimer laser, GT64A has been developed to cope with the prevention against rare resource shortage and the reduction of operational costs. GT64A provides the sophisticated technologies which realize the narrow spectral bandwidth with helium free operation. A helium gas purge has usually been employed due to the low refractive index variation with temperature rises within a line narrowing module(LNM). Helium is a non-renewable resource and the world's reserves have been running out. Nitrogen gas with an affordable price has been used as an alternative purge gas of helium on the restrictive condition of low thermal loads. However, the refractive index variation of nitrogen gas is approximately ten times more sensitive to temperature rises than that of helium, and broadens a spectral bandwidth in the high duty cycle operations. The new LNM design enables heat effect in laser shooting at optical elements and mechanical components in the vicinity of an optical path to be lower. This reduces thermal wavefront deformation of a laser beam without helium gas purge within LNM, and narrows a spectrum bandwidth without helium purge. Gigaphoton proved that the new LNM enabled E95 bandwidth without control to improve a lot with nitrogen purge.

  20. Development of a Silicon Based Electron Beam Transmission Window for Use in a KrF Excimer Laser System

    SciTech Connect

    C.A. Gentile; H.M. Fan; J.W. Hartfield; R.J. Hawryluk; F. Hegeler; P.J. Heitzenroeder; C.H. Jun; L.P. Ku; P.H. LaMarche; M.C. Myers; J.J. Parker; R.F. Parsells; M. Payen; S. Raftopoulos; J.D. Sethian

    2002-11-21

    The Princeton Plasma Physics Laboratory (PPPL), in collaboration with the Naval Research Laboratory (NRL), is currently investigating various novel materials (single crystal silicon, <100>, <110> and <111>) for use as electron-beam transmission windows in a KrF excimer laser system. The primary function of the window is to isolate the active medium (excimer gas) from the excitation mechanism (field-emission diodes). Chosen window geometry must accommodate electron energy transfer greater than 80% (750 keV), while maintaining structural integrity during mechanical load (1.3 to 2.0 atm base pressure differential, approximate 0.5 atm cyclic pressure amplitude, 5 Hz repetition rate) and thermal load across the entire hibachi area (approximate 0.9 W {center_dot} cm superscript ''-2''). In addition, the window must be chemically resistant to attack by fluorine free-radicals (hydrofluoric acid, secondary). In accordance with these structural, functional, and operational parameters, a 22.4 mm square silicon prototype window, coated with 500 nm thin-film silicon nitride (Si{sub 3}N{sub 4}), has been fabricated. The window consists of 81 square panes with a thickness of 0.019 mm {+-} 0.001 mm. Stiffened (orthogonal) sections are 0.065 mm in width and 0.500 mm thick (approximate). Appended drawing (Figure 1) depicts the window configuration. Assessment of silicon (and silicon nitride) material properties and CAD modeling and analysis of the window design suggest that silicon may be a viable solution to inherent parameters and constraints.

  1. Dynamic change of transmission of CaF2 single crystals by irradiating with ArF excimer laser light

    NASA Astrophysics Data System (ADS)

    Alkemper, Jochen; Kandler, Joerg; Strenge, Lorenz; Moersen, Ewald; Muehlig, Christian; Triebel, Wolfgang

    2000-07-01

    The laser induced absorption of CaF2 caused by ArF excimer laser light has been observed at energy densities of F equals 2-30 mJ/cm2 per pulse and a repetition rate of R equals 50 Hz. The experiments show that the transmission of CaF2 samples depends on the pulse energy density. The change of the absorption coefficient with the time of irradiation can be described by an exponential model. Different experiments were performed where the energy density was increased and decreased stepwise. They prove that color centers not only are formed but also are annihilated by irradiation. Laser induced decrease of absorption was observed in all samples as soon as the energy density was decreased. Coloring and bleaching of the samples are completely reversible processes. The level of transmission depends on the energy density of the laser light and the quality of the material but not on the history of irradiation. The damage resistance of the material can be adjusted by the appropriate choice of the raw material and the process parameters. The reversibility of the laser induced absorption can be explained by a reaction equilibrium. This leads to a model where the concentration of absorbing defects depends on the current irradiation conditions. Using these equations the reversibility and the observed exponential dependence of the change of transmission with time can be explained. Assuming different dependencies of the reaction constants of coloring and bleaching on the energy density, the change of the absorption coefficient with pulse energy density can be calculated.

  2. Comparative evaluation of visual outcomes and corneal asphericity after laser-assisted in situ keratomileusis with the six-dimension Amaris excimer laser system

    PubMed Central

    Piao, JunJie; Li, Ying-Jun; Whang, Woong-Joo; Choi, Mihyun; Kang, Min Ji; Lee, Jee Hye; Yoon, Geunyoung; Joo, Choun-Ki

    2017-01-01

    Purpose To compare the visual and refractive outcomes after laser-assisted in situ keratomileusis (LASIK) surgery for correction of myopia or myopic astigmatism using a six-dimensional Amaris excimer laser. Methods In this retrospective cohort study, we enrolled 47 eyes of 28 patients (age: 19–36 years) with myopia or myopic astigmatism. We used the Custom Ablation Manager protocol and performed ablations with the SCHWIND AMARIS system. LASIK flaps were cut with an iFS Advanced Femtosecond Laser. Mean static (SCC) and dynamic cyclotorsion (DCC) were evaluated. Visual and refractive outcomes were evaluated during 6 months’ follow-up. Corneal asphericity (Q-value) was analyzed at 4 months postoperatively. Results The spherical equivalent (SE) reduction was statistically significant reduce 1 day after refractive surgery (P < 0.001), with no additional significant changes during follow-up (P = 0.854). SCC registration rates were 81% in the Aberration-Free mode (AF) and 90% in the Corneal Wavefront mode (CW). SCC measurements were within ± 5 degrees in 57% (AF) and 68% (CW) of eyes. Mean DCC was within ± 1 degree in 96% (AF) or 95% (CW) of cases. At 6 months, the uncorrected distance visual acuity was 20/25 or better in all eyes. At last follow-up, both steep and flat keratometry values had significantly flattened in both groups (P < 0.001). Corneal asphericity also increased significantly during the postoperative period for an 8-mm corneal diameter (P < 0.001). Conclusions LASIK for myopia or myopic compound astigmatism correction using the six-dimensional AMARIS 750S excimer laser is safe, effective, and predictable. Postoperative corneal asphericity can be analyzed by linear regression to predict the changes in postoperative corneal asphericity with this approach. PMID:28187180

  3. Applying low-energy multipulse excimer laser annealing to improve charge retention of Au nanocrystals embedded MOS capacitors

    NASA Astrophysics Data System (ADS)

    Shen, Kuan-Yuan; Chen, Hung-Ming; Liao, Ting-Wei; Kuan, Chieh-Hsiung

    2015-02-01

    The low-energy multipulse excimer laser annealing (LEM-ELA) is proposed to anneal the nanostructure of nanocrystal (NC) embedded in a SiO2 thin film without causing atomic diffusion and damaging the NCs, since the LEM-ELA combining the advantages of laser annealing and UV curing features rapid heating and increasing oxide network connectivity. A Fourier transform infrared spectroscopy (FTIR) characterization of SiO2 thin films annealed using LEM-ELA indicated that the quality was improved through the removal of water-related impurities and the reconstruction of the network Si-O-Si bonds. Then, LEM-ELA was applied to a SiO2 thin film embedded with Au NCs, which were fabricated as MOS capacitors. The charge retention was greatly improved and the percentage of retained charges was about 10% after 3  ×  108 s. To investigate and differentiate the effects of LEM-ELA on charges stored in both oxide traps and in the Au NCs, a double-mechanism charge relaxation analysis was performed. The results indicated that the oxide traps were removed and the confinement ability of Au NCs was enhanced. The separated memory windows contributed from the charges in Au NCs and those in oxide traps were obtained and further confirmed that the LEM-ELA removed oxide traps without damaging the Au NCs.

  4. Enhanced electrical and optical properties of room temperature deposited Aluminium doped Zinc Oxide (AZO) thin films by excimer laser annealing

    NASA Astrophysics Data System (ADS)

    El hamali, S. O.; Cranton, W. M.; Kalfagiannis, N.; Hou, X.; Ranson, R.; Koutsogeorgis, D. C.

    2016-05-01

    High quality transparent conductive oxides (TCOs) often require a high thermal budget fabrication process. In this study, Excimer Laser Annealing (ELA) at a wavelength of 248 nm has been explored as a processing mechanism to facilitate low thermal budget fabrication of high quality aluminium doped zinc oxide (AZO) thin films. 180 nm thick AZO films were prepared by radio frequency magnetron sputtering at room temperature on fused silica substrates. The effects of the applied RF power and the sputtering pressure on the outcome of ELA at different laser energy densities and number of pulses have been investigated. AZO films deposited with no intentional heating at 180 W, and at 2 mTorr of 0.2% oxygen in argon were selected as the optimum as-deposited films in this work, with a resistivity of 1×10-3 Ω.cm, and an average visible transmission of 85%. ELA was found to result in noticeably reduced resistivity of 5×10-4 Ω.cm, and enhancing the average visible transmission to 90% when AZO is processed with 5 pulses at 125 mJ/cm2. Therefore, the combination of RF magnetron sputtering and ELA, both low thermal budget and scalable techniques, can provide a viable fabrication route of high quality AZO films for use as transparent electrodes.

  5. Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing

    NASA Astrophysics Data System (ADS)

    Sanza, F. J.; Laguna, M. F.; Casquel, R.; Holgado, M.; Barrios, C. A.; Ortega, F. J.; López-Romero, D.; García-Ballesteros, J. J.; Bañuls, M. J.; Maquieira, A.; Puchades, R.

    2011-04-01

    Cost-effective SU-8 micro-structures on a silicon substrate were developed using 248 nm excimer laser KrF projection, studying the influence of the different variables on the final pattern geometry, finding out that the most critical are exposure dose and post-bake condition. Also a novel and cost effective type of photomask based on commercial polyimide Kapton produced by 355 nm DPSS laser microprocessing was developed, studying the influence of the cutting conditions on the photomask. Finally, as a likely application the biosensing capability with a standard BSA/antiBSA immunoassay over a 10 × 10 micro-plates square lattice of around 10 μm in diameter, 15 μm of spacing and 400 nm in height was demonstrated, finding a limit of detection (LOD) of 33.4 ng/ml which is in the order of magnitude of bioapplications such as detection of cortisol hormone or insulin-like growth factor. Low cost fabrication and vertical interrogation characterization techniques lead to a promising future in the biosensing technology field.

  6. Excimer laser ablation mass spectrometry of inorganic solids: Chemical, matrix, and sampling effects on polyatomic ion yields

    SciTech Connect

    Gibson, J.K.

    1995-07-01

    Positive ions formed directly by excimer laser ablation in vacuum of several lanthanide (Ln) and transition metal solid materials---including Ln{sub 2}O{sub 3}, Ln{sub 2}S{sub 3}, LnF{sub 3}, Ta{sub 2}O{sub 5}, ZrO{sub 2}, TiO, and TiO{sub 2}---were identified by time-of-flight mass spectrometry. Variations in ion yields were investigated as a function of the composition of the precursor material, laser irradiance, and ion sampling delay after ablation. The compositions of the observed polyatomic ions reflected the distinctive chemistries of the metal constituents, but the ion yield distributions were not generally indicative of the particular chemical/valence constitution of the target material. For example, the yield of CeO{sup +} relative to Ce{sup +} was substantially greater from the trivalent cerium oxide, Ce{sub 2}(WO{sub 4}){sub 3}(s), than from tetravalent CeO{sub 2}(s). Observed ion distributions apparently reflected the chemical composition of the ablation plume and the degree of gas-phase recombination therein. The observed abundances of polyatomic ions were found to correlate well with their estimated bond strengths. Further obscuring the chemical composition of the progenitor, minor changes in ablation, and sampling parameters---especially irradiance and sampling delay---were often manifested as significant variations in relative ion intensities. {copyright} {ital 1995} {ital American} {ital Vacuum} {ital Society}

  7. Rapid-melt-mediated recrystallization of ZnO thin films grown at low temperature by using KrF excimer laser irradiation

    NASA Astrophysics Data System (ADS)

    Oh, Min-Suk; Seo, Inseok

    2015-11-01

    ZnO thin films with thickness of 150 nm were grown on ITO/glass (ITO-coated glass) substrates by using the radio-frequency (RF) sputtering technique at 400 °C in an Ar atmosphere. An excimer laser irradiation (ELI) treatment was performed on the surface of ZnO thin films at different excimer laser energy densities of 150, 200, and 250 mJ/cm2 in a N2 atmosphere. The ELI treatment promoted the lateral recystallization of the surface area of the ZnO, resulting in a significant improvement of the crystallinity of the ZnO thin films without substrate damage. As-grown ZnO and ELI-treated ZnO thin films were characterized by using scanning electron microscopy (SEM), atomic force microscopy (AFM), and X-ray diffraction (XRD). The analyses showed that the ZnO thin film treated with ELI at an excimer laser energy density of 150 mJ/cm2 exhibited the best structural properties.

  8. Thermodynamic measurements in a high pressure hydrogen-oxygen flame using Raman scattering from a broadband excimer laser

    NASA Technical Reports Server (NTRS)

    Hartfield, Roy, Jr.

    1996-01-01

    Raman scattering is an inelastic molecular scattering process in which incident radiation is reemitted at a fixed change in frequency. Raman spectroscopy can be used to measure the number density and temperature of the irradiated species. The strength of the Raman signal is inversely proportional to the wavelength raised to the fourth power. Consequently, high signal to noise ratios are obtained by using ultraviolet (UV) excitation sources. Using UV sources for Raman Spectroscopy in flames is complicated by the fact that some of the primary constituents in hydrogen-oxygen combustion absorb and reemit light in the UV and these fluorescence processes interfere with the Raman signals. This problem has been handled in atmospheric pressure flames in some instances by using a narrowband tunable excimer laser as a source. This allows for detuning from absorption transitions and the elimination of interfering fluorescence signals at the Raman wavelengths. This approach works well in the atmospheric pressure flame; however, it has two important disadvantages. First, injection-locked narrowband tunable excimer lasers are very expensive. More importantly, however, is the fact that at the high pressures characteristic of rocket engine combustion chambers, the absorption transitions are broadened making it difficult to tune to a spectral location at which substantial absorption would not occur. The approach taken in this work is to separate the Raman signal from the fluorescence background by taking advantage of the fact that Raman signal has nonisotropic polarization characteristics while the fluorescence signals are unpolarized. Specifically, for scattering at right angles to the excitation beam path, the Raman signal is completely polarized. The Raman signal is separated from the fluorescence background by collecting both horizontally and vertically polarized signals separately. One of the polarizations has both the Raman signal and the fluorescence background while the

  9. Properties of the ablation process for excimer laser ablation of Y sub 1 Ba sub 2 Cu sub 3 O sub 7

    SciTech Connect

    Neifeld, R.A.; Potenziani, E. ); Sinclair, W.R. ); Hill III, W.T.; Turner, B.; Pinkas, A. )

    1991-01-15

    The process of excimer laser ablation has been studied while varying the laser fluence from 0.237 to 19.1 J/cm{sup 2}. Ion time-of-flight, total charge, target etch depth per pulse, and etch volume per pulse have been measured. Results indicate a maximum ablation volume and minimum ionization fraction occur near 5 J/cm{sup 2}. Several of the parameters measured vary rapidly in the 1--5 J/cm{sup 2} range. Variation in these parameters strongly influences the properties of films grown by this technique.

  10. [Theoretical and physical aspects of excimer laser trabeculotomy (ELT) ab interno with the AIDA laser with a wave length of 308 mm].

    PubMed

    Walker, R; Specht, H

    2002-05-01

    Ablation of tissue structures containing and surrounded by water differs from tissue ablation at a surface, not only theoretically, but also in terms of outcome. In contrast to the situation often observed with surface ablation, it is shown that the trabecular meshwork in the anterior chamber of the eye can be ablated cleanly and accurately with the 308 nm Excimer laser without causing collateral thermal damage. The reason for this is that in the trabecular meshwork, the ratio of radiation-absorbing tissue to water--which absorbs very little energy--is very small. A marked cooling effect thus results, which permits the development of only a very small amount of collateral thermal damage at the boundaries of the ablation zone.

  11. Selective area in situ conversion of Si (0 0 1) hydrophobic to hydrophilic surface by excimer laser irradiation in hydrogen peroxide

    NASA Astrophysics Data System (ADS)

    Liu, Neng; Huang, Xiaohuan; Dubowski, Jan J.

    2014-09-01

    We report on a method of rapid conversion of a hydrophobic to hydrophilic state of an Si (0 0 1) surface irradiated with a relatively low number of pulses of an excimer laser. Hydrophilic Si (0 0 1), characterized by the surface contact angle (CA) of near 15°, is fabricated following irradiation with either KrF or ArF excimer lasers of hydrophobic samples (CA ˜ 75°) immersed in a 0.01% H2O2/H2O solution. The chemical and structural analysis carried with x-ray photoelectron spectroscopy and atomic force microscopy measurements confirmed the formation of OH-terminated Si (0 0 1) surface with no detectable change in the surface morphology of the laser-irradiated material. To investigate the efficiency of this laser-induced hydrophilization process, we demonstrate a selective area immobilization of biotin-conjugated fluorescein-stained nanospheres outside of the laser-irradiated area. The results demonstrate the potential of the method for the fabrication of biosensing architectures and advancements of the Si-based microfluidic device technology.

  12. Studies of nitride- and oxide-based materials as absorptive shifters for embedded attenuated phase-shifting mask in 193 nm

    NASA Astrophysics Data System (ADS)

    Lin, Cheng-ming; Chang, Keh-wen; Lee, Ming-der; Loong, Wen-An

    1999-07-01

    Abstract-Five materials which are PdSixOy, CrAlxOy, SiNx, TiSixNy, and TiSixOyNz as absorptive shifters for attenuated phase-shifting mask in 193 nm wavelength lithography are presented. PdSixOy films were deposited by dual e-gun evaporation. CrAlxOy, TiSixNy and TiSixOyNz films were formed by plasma sputtering and SiNx films were formed with LPCVD. All of these materials are shown to be capable of achieving 4 percent - 15 percent transmittance in 193 nm with thickness that produce a 180 degrees phase shift. Under BCl3:Cl2 equals 14:70 sccm; chamber pressure 5 mtorr and RF power 1900W, the dry etching selectivity of TiSixNy over DQN positive resist and fused silica, were found to be 2:1 and 4,8:1 respectively. An embedded layer TiSixNy with 0.5 micrometers line/space was successfully patterned.

  13. Ceramic surface modifications induced by pulsed laser treatment

    NASA Astrophysics Data System (ADS)

    Cappelli, E.; Orlando, S.; Sciti, D.; Montozzi, M.; Pandolfi, L.

    2000-02-01

    Technical polycrystalline sintered Al 2O 3 (90%) substrates have been irradiated, in a vacuum chamber, at grazing incident angles (˜30°), with pulsed ArF ( λ=193 nm, hν=6.4 eV) excimer laser, at different fluences and numbers of pulses, to modify the structure and morphology of the surface. Vacuum, inert gas and oxygen atmospheres, at different substrate temperatures, ˜25°C and ˜700°C, have been used to study surface chemistry and morphology modifications induced by laser energy. Surface chemistry has been analysed by XPS spectroscopy. Morphological modifications have been studied by SEM/EDS microscopy. Changes in surface roughness have been quantified by a standard profilometer.

  14. In situ diagnostics of pulse laser-induced defects in DUV transparent fused silica glasses

    NASA Astrophysics Data System (ADS)

    Mühlig, Ch.; Triebel, W.; Bark-Zollmann, S.; Grebner, D.

    2000-05-01

    Excimer laser pulses (λ=248 or 193 nm) induce transient and permanent defects in optical glasses of high UV transparency. Such defects are causing additional absorption and changes of density and refractive index, respectively (compaction). The interaction of each laser pulse with different OH-rich fused silica samples was investigated by real time measurements of laser-induced fluorescence (LIF) and of Raman spectra excited by the 248 nm KrF-excimer laser. The irradiation of the glasses with energy densities of about 10 mJ/cm2 and more induces E‧ and NBOH defects simultaneously. The laser-induced fluorescence of NBOH defect centres at 650 nm characterises the kinetics of defect generation and relaxation. The primary absorption process is the two-photon absorption of KrF laser pulses. The relaxation of defects in the time interval between the laser pulses is mainly influenced by diffusion limited processes. Locally resolved LIF and Raman spectra allow the investigation of homogeneity and laser damage stability in large area substrates (e.g. for mask blanks). Raman spectra excited by KrF laser pulses are measured to detect precursors and intermediates of laser-induced defects and molecular hydrogen in the glass matrix. The detection limit of H2 molecules is in the range of 1017 cm-3. A correlation between LIF intensities and H2 concentrations is found.

  15. Experimental investigation of a pulsed Rb–Ar excimer-pumped alkali laser

    NASA Astrophysics Data System (ADS)

    Cheng, Hongling; Wang, Zhimin; Zhang, Fengfeng; Wang, Mingqiang; Tian, Zhaoshuo; Peng, Qinjun; Cui, Dafu; Xu, Zuyan

    2017-03-01

    We present experimental results of an exciplex-pumped alkali laser (XPAL) at 780 nm based on the 52P3/2 → 52S1/2 transition of the Rb atom in mixtures of Rb vapor and Ar. A laboratory-built Ti:sapphire laser with a pulse repetition rate of 3 kHz and a pulse width of 100 ns is used as the pump source. The maximum laser pulse energy of 0.26 µJ at 780 nm is obtained under an absorbed pump pulse energy of 42 µJ at 755 nm in mixtures of Rb vapor and Ar at a temperature of 423 K, corresponding to an optical conversion efficiency of 0.62%. Further experiments show that the output laser at 780 nm can always be detected for pump wavelengths ranging from 754 to 759 nm, indicating that Rb–Ar mixtures can be effectively pumped by commercial laser diodes (LDs) with a bandwidth of 5 nm.

  16. Fine structure in krypton excimer

    SciTech Connect

    Hemici, M.; Saoudi, R.; Descroix, E.; Audouard, E.; Laporte, P. ); Spiegelmann, F. )

    1995-04-01

    By using laser reduced fluorescence techniques, molecular absorption from the first relaxed excited excimer states of krypton is obtained in the 960--990-nm wavelength range. Five bands are observed and analyzed by comparison with an [ital ab] [ital initio] calculated spectrum. The fine structure is thus evidenced.

  17. Analysis of the PMMA and cornea temperature rise during excimer laser ablation

    NASA Astrophysics Data System (ADS)

    Arba-Mosquera, Samuel; Shraiki, Mario

    2010-03-01

    A general method to analyze the ablation temperature for different materials (in particular in the human cornea and poly-methyl-methacrylate (PMMA)) is provided. The model is comprehensive and provides directly laser beam characteristics and ablative spot properties. The model further provides a method to convert the temperature rise during ablation observed in PMMA to equivalent temperature rises in the cornea. The proposed model can be used for calibration, verification and validation purposes of laser systems used for ablation processes at relatively low cost and would directly improve the quality of results.

  18. Ablation d'un film d'or par laser à excimère

    NASA Astrophysics Data System (ADS)

    Sentis, M.; Hermann, J.; Pereira, A.; Delaporte, Ph.; Marine, W.; Perrière, J.; Bianchi, L.; Galli, R.

    2003-06-01

    Ces travaux de recherche ont été réalisés dans le cadre du projet de développement du Laser MégaJoule (LMJ). Parmi les expériences d'interaction laser - matière à très haut flux, certaines conduiront à un dépôt de particules d'or sur les éléments internes de la chambre d'interaction. Pour nettoyer ce dépôt de particules, la possibilité d'utiliser un procédé automatisé basé sur l'ablation laser a été étudiée. Un modèle numérique simplifié a été développé et une étude expérimentale réalisée sur des échantillons d'acier inoxydable ou de B4C recouverts d'un film d'or d'une épaisseur de ~20 nm déposés par PVD. Ces travaux montrent que plus de 95 % du film d'or peuvent être enlevés avec quelques tirs d'un laser XeCI dès que la densité d'énergie dépasse 3 J/cm^2.

  19. ''Runaway'' electron current and formation of spatial structures in excimer laser plasmas

    SciTech Connect

    Dresvyannikov, V.G.; Fisun, O.I.

    1983-10-01

    Results are presented of a nonlinear analysis of runaway plasma current observed in KrF( electrodischarge laser plasmas maintained by an electron beam. It is shown that under these conditions, a uniform plasma is unstable with respect to pinching, which results in arc formation.

  20. Single photon excimer laser photodissociation of highly vibrationally excited polyatomic molecules

    SciTech Connect

    Tiee, J.J.; Wampler, F.B.; Rice, W.W.

    1980-01-01

    The ir + uv photodissociation of SF/sub 6/ has been performed using CO/sub 2/ and ArF lasers. The two-color photolysis significantly enhances the photodissociation process over ArF irradiation alone and is found to preserve the initial isotopic specificity of the ir excitation process.

  1. Treatment of in-stent restenosis with excimer laser coronary angioplasty: benefits over scoring balloon angioplasty alone.

    PubMed

    Hirose, Shunsuke; Ashikaga, Takashi; Hatano, Yu; Yoshikawa, Shunji; Sasaoka, Taro; Maejima, Yasuhiro; Isobe, Mitsuaki

    2016-11-01

    Treatment of in-stent restenosis (ISR) is associated with a high incidence of recurrence. This study evaluated the clinical safety and 6-month efficacy of excimer laser coronary angioplasty (ELCA) before scoring balloon dilatation for the treatment of ISR. Twenty-three patients with ISR were included and treatment strategy of ISR was dependent on each operator. Twelve patients among those were treated with ELCA before scoring balloon dilatation (ELCA group) and 11 patients were treated with scoring balloon alone (non-ELCA group). Acute procedural results were evaluated by quantitative coronary angiography (QCA) and frequency domain optical coherence tomography (FD-OCT). Follow-up angiography was performed in all patients and the incidence of recurrent ISR and target lesion revascularization (TLR) was determined at 6 months after initial ISR treatment. Procedural success was achieved in all patients. Baseline clinical and angiographic characteristics were similar between groups. Maximum dilatation pressure of scoring balloon was significantly lower in the ELCA group than in the non-ELCA group (9.0 ± 3.1 vs. 14.9 ± 4.3 atm, p = 0.001). In follow-up angiography, the occurrence of TLR was similar between groups (16.7 vs. 45.5 %, p = 0.09), but the late luminal loss was significantly lower in the ELCA group (0.7 ± 0.6 vs. 1.3 ± 0.7 mm, p = 0.03). ELCA is a safe and feasible technique for the treatment of ISR and associated with a relatively low recurrent restenosis in comparison with scoring balloon dilatation alone.

  2. Thin film 193nm TNK measurement using multi-domain genetic algorithm (MDGA) with a combination of beam profile reflectometry (BPR), absolute ellipsometry (AE), and spectroscopic ellipsometry (SE)

    NASA Astrophysics Data System (ADS)

    Opsal, Jon L.; Leng, Jingmin; Ke, Chih-Ming; Chen, Pei-Hung; Chen, Jeng-Horng; Ku, Yao-Ching

    2003-11-01

    In the l30nm process, controlling the critical dimension uniformity (CDU) within a wafer is crucial. In order to minimize CDU within a wafer, CD swing amplitude against film thickness must be minimized. It is observed that the CD swing amplitude is closely related to the reflectivity of the anti-reflective coating (ARC) layer under the resist. The suppressed reflectivity (ideally zero) from the ARC layer and underlying layers can be achieved by properly selecting a combination of thickness (T), refractive index (N) and extinction coefficient (K) of the ARC layer. Accurate and repeatable measurements of T, N, and K at a wavelength of 193nm play a key role in this film optimization process. In this paper we propose a new method to simultaneously measure T, N, and K for various silicon oxynitride (SION) and organic ARC films. The new methodology uses a multi-domain genetic algorithm (MDGA) to search for global fitting residual minima for SION and organic ARC films using 21-point line-scan data sets logged on each wafer with a combination of BPR, AE and SE measurement technologies. The MDGA-obtained dispersion curves form constituents of a Bruggeman effective medium approximation (EMA) model. By using this unique metrology tool combination, swing amplitudes can be reduced to less than 5nm. The measurement variations of N&K at 193nm from machine to machine on SION and organic ARC films can be minimized to as small as 0.002. We point out that there are no 193nm N&K standards in the world. In this work, we used a set of Therma-Wave standards with thicknesses traceable to NIST standards. We also used the published thermal oxide and crystalline Si dielectric constants (i.e., N&Ks) as our standards for dispersion. The matching of SE (as well as the other technologies) of each tool is ensured through calibrations of SE to the same set of standards. Finally, a recipe using the combination of BPR, AE, and SE technologies allows one to deal with the large TNK variations

  3. Challenges of 29nm half-pitch NAND Flash STI patterning with 193nm dry lithography and self-aligned double patterning

    NASA Astrophysics Data System (ADS)

    Chiu, M. C.; Lin, Benjamin Szu-Min; Tsai, M. F.; Chang, Y. S.; Yeh, M. H.; Ying, T. H.; Ngai, Chris; Jin, Jaklyn; Yuen, Stephen; Huang, Sem; Chen, Yongmei; Miao, Liyan; Tai, Kevin; Conley, Amiad; Liu, Ian

    2008-11-01

    High NA (1.35) Immersion litho runs into the fundamental limit of printing at 40-45nm half pitch (HP). The next generation EUVL tool is known to be ready not until year 2012. Double patterning (DP) technology has been identified as the extension of optical photolithography technologies to 3xnm and 2xnm half-pitch for the low k1 regime to fill in the gap between Immersion lithography and EUVL. Self Aligned Double Patterning (SADP) Technology utilized mature process technology to reduce risk and faster time to market to support the continuation of Moore's Law of Scaling to reduce the cost/function. SADP uses spacer to do the pitch splitting bypass the conventional double patterning (e.g. Litho-Freeze-Litho-Etch (LFLE), or Litho-Etch-Litho-Etch (LELE)) overlay problem. Having a tight overlay performance is extremely critical for NAND Flash manufacturers to achieve a fast yield ramp in production. This paper describes the challenges and accomplishment of a Line-By-Spacer (LBS) SADP scheme to pattern the 29nm half-pitch NAND Flash STI application. A 193nm Dry lithography was chosen to pattern on top of the amorphous carbon (a-C) film stack. The resist pattern will be transferred on the top a-C core layer follow by spacer deposition and etch to achieve the pitch splitting. Then the spacer will be used to transfer to the bottom a-C universal hardmask. This high selectivity a-C hardmask will be used to transfer the 29nm half-pitch pattern to the STI. Good within wafer CD uniformity (CDU) <2nm and line width roughness (LWR) <2nm for the 29nm half-pitch NAND FLASH STI were demonstrated as the benefits using double amorphous carbon hardmask layers. The relationships among the photoresist CDs, CD trimming , as-deposited spacer film thickness, spacer width and the final STI line/core space/gap space CDs will also be discussed in this paper since patterning is combining both lithography performance with CVD and Etch process performance. Film selection for amorphous carbon and

  4. Iron nanoparticle growth induced by Kr-F excimer laser photolysis of Fe(CO)5

    NASA Astrophysics Data System (ADS)

    Eremin, A. V.; Gurentsov, E. V.; Priemchenko, K. Yu

    2013-06-01

    In this article the process of nanoparticle formation under the condensation of highly supersaturated atomic vapor produced by the photodissociation of metal-bearing compounds was investigated. The iron nanoparticles were synthesized by Kr-F laser pulse photolysis of Fe(CO)5. The measurements of an optical density of condensed phase were performed using a laser light extinction at a wavelength 633 nm. The particle size during their formation process was measured by a two-color time-resolved laser-induced incandescence. The final iron particle sizes and their structure were analyzed by a transmission electron microscopy. It has been shown that the process of iron particle formation in the investigated conditions could be divided onto three stages: the fast nucleation of iron atoms during 1-2 μs, the surface growth of particles up to the sizes of 1-6 nm with increasing volume fraction of condensed phase during 100-250 μs, and the relatively slow particle coagulation up to the final sizes of 5-9 nm. The effective rate constants of iron clusters and particle growth were extracted using laser light extinction measurements. The essential role of the reactions of iron clusters and particles with the parental Fe(CO)5 molecules was established. The kinetic mechanism of iron nanoparticle growth induced by photo-dissociation of Fe(CO)5 at room temperature based on obtained experimental results and known literature data has been suggested. The results obtained could be used for the developments of methods of synthesis of catalysts, magnetic nanopowders, and others nanomaterials at room temperature. Besides that, the presented experimental data could be useful for the validation of kinetic models of gas-phase condensation of supersaturated vapor of solids.

  5. Tungsten-carbon multilayers for x-ray optics prepared by ArF excimer-laser-induced chemical vapor deposition

    SciTech Connect

    Mutoh, K.; Yamada, Y.; Iwabuchi, T.; Miyata, T. )

    1990-08-01

    The authors have studied the characteristics of tungsten (W) and carbon (C) thin films, and W/C multilayers prepared by ArF excimer-laser-induced chemical vapor deposition using tungsten hexafluoride and benzene gases. Amorphous W and C films with very smooth surfaces were obtained at substrate temperatures of 100--200 {degree}C and 100--300 {degree}C, respectively. In small-angle x-ray scattering measurements for the multilayers deposited at 200 {degree}C, a first order of multilayer reflections were clearly observed. Furthermore, Auger electron spectroscopy showed that W and C layers in the multilayers were periodically deposited.

  6. Tungsten-carbon multilayers for x-ray optics prepared by ArF excimer-laser-induced chemical vapor deposition

    NASA Astrophysics Data System (ADS)

    Mutoh, Katsuhiko; Yamada, Yuka; Iwabuchi, Takashi; Miyata, Takeo

    1990-08-01

    The authors have studied the characteristics of tungsten (W) and carbon (C) thin films, and W/C multilayers prepared by ArF excimer-laser-induced chemical vapor deposition using tungsten hexafluoride and benzene gases. Amorphous W and C films with very smooth surfaces were obtained at substrate temperatures of 100-200 °C and 100-300 °C, respectively. In small-angle x-ray scattering measurements for the multilayers deposited at 200 °C, a first order of multilayer reflections were clearly observed. Furthermore, Auger electron spectroscopy showed that W and C layers in the multilayers were periodically deposited.

  7. Excimer laser forward transfer of mammalian cells using a novel triazene absorbing layer

    NASA Astrophysics Data System (ADS)

    Doraiswamy, A.; Narayan, R. J.; Lippert, T.; Urech, L.; Wokaun, A.; Nagel, M.; Hopp, B.; Dinescu, M.; Modi, R.; Auyeung, R. C. Y.; Chrisey, D. B.

    2006-04-01

    We present a novel laser-based approach for developing tissue engineered constructs and other cell-based assembly's. We have deposited mesoscopic patterns of viable B35 neuroblasts using a soft direct approach of the matrix assisted pulsed laser evaporation direct write (MAPLE DW) process. As a development of the conventional direct write process, an intermediate layer of absorbing triazene polymer is used to provide gentler and efficient transfers. Transferred cells were examined for viability and proliferation and compared with that of as-seeded cells to determine the efficacy of the process. Results suggest that successful transfers can be achieved at lower fluences than usual by the incorporation of the intermediate absorbing layer thus avoiding any damage to cells and other delicate materials. MAPLE DW offers rapid computer-controlled deposition of mesoscopic voxels at high spatial resolutions, with extreme versatility in depositing combinations of natural/synthetic, living/non-living, organic/inorganic and hard/soft materials. Our approach offers a gentle and efficient transfer of viable cells which when combined with a variety of matrix materials allows development of constructs and bioactive systems in bioengineering.

  8. Some optical and electron microscope comparative studies of excimer laser-assisted and nonassisted molecular-beam epitaxically grown thin GaAs films on Si

    NASA Technical Reports Server (NTRS)

    Lao, Pudong; Tang, Wade C.; Rajkumar, K. C.; Guha, S.; Madhukar, A.; Liu, J. K.; Grunthaner, F. J.

    1990-01-01

    The quality of GaAs thin films grown via MBE under pulsed excimer laser irradiation on Si substrates is examined in both laser-irradiated and nonirradiated areas using Raman scattering, Rayleigh scattering, and by photoluminescence (PL), as a function of temperature, and by TEM. The temperature dependence of the PL and Raman peak positions indicates the presence of compressive stress in the thin GaAs films in both laser-irradiated and nonirradiated areas. This indicates incomplete homogeneous strain relaxation by dislocations at the growth temperature. The residual compressive strain at the growth temperature is large enough such that even with the introduction of tensile strain arising from the difference in thermal expansion coefficients of GaAs and Si, a compressive strain is still present at room temperature for these thin GaAs/Si films.

  9. Excimer laser deinsulation of Parylene-C on iridium for use in an activated iridium oxide film-coated Utah electrode array.

    PubMed

    Yoo, Je-Min; Negi, Sandeep; Tathireddy, Prashant; Solzbacher, Florian; Song, Jong-In; Rieth, Loren W

    2013-04-30

    Implantable microelectrodes provide a measure to electrically stimulate neurons in the brain and spinal cord and record their electrophysiological activity. A material with a high charge capacity such as activated or sputter-deposited iridium oxide film (AIROF or SIROF) is used as an interface. The Utah electrode array (UEA) uses SIROF for its interface material with neural tissue and oxygen plasma etching (OPE) with an aluminium foil mask to expose the active area, where the interface between the electrode and neural tissue is formed. However, deinsulation of Parylene-C using OPE has limitations, including the lack of uniformity in the exposed area and reproducibility. While the deinsulation of Parylene-C using an excimer laser is proven to be an alternative for overcoming the limitations, the iridium oxide (IrOx) suffers from fracture when high laser fluence (>1000 mJ/cm2) is used. Iridium (Ir), which has a much higher fracture resistance than IrOx, can be deposited before excimer laser deinsulation and then the exposed Ir film area can be activated by electrochemical treatment to acquire the AIROF. Characterisation of the laser-ablated Ir film and AIROF by surface analysis (X-ray photoelectron spectroscopy, scanning electron microscope, and atomic force microscope) and electrochemical analysis (electrochemical impedance spectroscopy, and cyclic voltammetry) shows that the damage on the Ir film induced by laser irradiation is significantly less than that on SIROF, and the AIROF has a high charge storage capacity. The results show the potential of the laser deinsulation technique for use in high performance AIROF-coated UEA fabrication.

  10. Excimer laser produced plasmas in copper wire targets and water droplets

    NASA Technical Reports Server (NTRS)

    Song, Kyo-Dong; Alexander, D. R.

    1994-01-01

    Elastically scattered incident radiation (ESIR) from a copper wire target illuminated by a KrF laser pulse at lambda = 248 nm shows a dinstinct two-peak structure which is dependent on the incident energy. The time required to reach the critical electron density (n(sub c) approximately = 1.8 x 10(exp 22) electrons/cu cm) is estimated at 11 ns based on experimental results. Detailed ESIR characteristics for water have been reported previously by the authors. Initiation of the broadband emission for copper plasma begins at 6.5 +/- 1.45 ns after the arrival of the laser pulse. However, the broadband emission occurs at 11 +/- 0.36 ns for water. For a diatomic substance such as water, the electron energy rapidly dissipates due to dissociation of water molecules, which is absent in a monatomic species such as copper. When the energy falls below the excitation energy of the lowest electron state for water, it becomes a subexcitation electron. Lifetimes of the subexcited electrons to the vibrational states are estimated to be of the order of 10(exp -9) s. In addition, the ionization potential of copper (440-530 nm) is approximately 6 eV, which is about two times smaller than the 13 eV ionization potential reported for water. The higher ionization potential contributes to the longer observed delay time for plasma formation in water. After initiation, a longer time is required for copper plasma to reach its peak value. This time delay in reaching the maximum intensity is attributed to the energy loss during the interband transition in copper.

  11. A method of atmospheric density measurements during Shuttle entry using UV laser Rayleigh scattering

    NASA Technical Reports Server (NTRS)

    Mckenzie, Robert L.

    1987-01-01

    A detailed study is described of the performance capabilities and the hardware requirements for a method in which ambient density is measured along the Space Shuttle flight path using on-board optical instrumentation. The technique relies on Rayleigh scattering of light from a pulsed, ultraviolet, ArF excimer laser operating at a wavelength of 193 nm. The method is shown to be capable of providing direct measurements of ambient density with an uncertainty of less than 1 percent and with a spatial resolution of 1 km, over an altitude range from 50 to 90 km. In addition, extensions of this concept are discussed that allow measurements of the shock wave location and the density profile within the shock layer. Two approaches are identified that appear to be feasible, in which the same laser system is used for the extended measurements as that required for the ambient density measurements.

  12. Characterization of polyperinaphthalenic organic semiconductor thin films prepared by excimer laser ablation and application to anode electrodes for ultrathin rechargeable Li ion batteries

    NASA Astrophysics Data System (ADS)

    Nishio, Satoru; Tamura, Kazuyuki; Tsujine, Yukari; Fukao, Tomoko; Murata, Jun; Nakano, Masyoshi; Matsuzaki, Akiyoshi; Sato, Hiroyasu; Ando, Nobuo; Hato, Yukinori

    2001-06-01

    Polyperinaphthlenic organic semiconductor (PPNOS) films with polyperinaphthalene (PPN) structure for anode electrodes for ultra thin rechargeable Li ion batteries are prepared on temperature-controlled substrates by excimer laser ablation (ELA) of 3, 4, 9, 10-perylenetetracarboxylic dianhydride (PTCDA) or mixture target of PTCDA with a few metal powder (PTCDA/M) using a 308 nm (XeCl) pulsed excimer laser beam. It is demonstrated that ELA of PTCDA at a fluence of less than 0.5 Jcm-2pulse-1 enables us to obtain PPNOS on a substrate at 300 degree(s)C. It is found that ELA of PTCDA/Co at a fluence of more than 1.0 Jcm-4pulse-1 leads to produce effectively fragments without anhydride groups of PTCDA. FT-IR and Raman spectroscopies reveal that ELA of PTCDA/Co enables us to obtain better-defined PPN films with electric conductivity of approximately 1x10-1Scm-1 on a substrate at 300 degree(s)C. Electrochemical doping characteristics of lithium ion into the films obtained by ELA are performed to verify the lithium doping mechanism by in situ Raman spectroscopy. Furthermore a trial piece of thin lithium ion rechargeable battery with the films is fabricated to appraise performance of the films as anode thin electrodes for ultra thin rechargeable lithium ion batteries.

  13. Preparation of polyperinaphthalenic organic semiconductor thin films by excimer laser ablation and application to anode electrodes for ultrathin rechargable lithium ion batteries

    NASA Astrophysics Data System (ADS)

    Nishio, Satoru; Kuriki, Sigenori; Tsujine, Yukari; Matsuzaki, Akiyoshi; Sato, Hiroyasu; Ando, Nobuo; Hato, Yukinori; Tanaka, Kazuyoshi

    2000-06-01

    Amorphous organic semiconductor thin films are prepared on temperature-controlled substrates by excimer laser ablation (ELA) of 3, 4, 9, 10-perylenetetracarboxylic dianhydride (PTCDA) or PTCDA/Co mixture target with a 308(XeCl) pulsed excimer laser beam. Drastic increase in conductivity was observed along with decrease in the IR peak intensities related to the side groups of PTCDA monomers for films prepared on substrates above 200°C. Electric conductivity of a film prepared on a substrate at 300°C comes up to 10-1Scm-1. Although carbon radicals are detected to some extent, indicating incomplete polymerization. Raman spectroscopic measurement reveals that this film basically consists of polyperinaphthalene (PPN) structure. This material is named polyperinaphthlenic organic semiconductor (PPNOS). ELA of mixture target of PTCDA and Co enables us to obtain PPNOS at room temperature. Electrochemical doping of PPNOS films with lithium ion suggests the passable performance of this film as anode electrodes of ultra thin rechargeable lithium ion batteries.

  14. Agreement between clinical history method, Orbscan IIz, and Pentacam in estimating corneal power after myopic excimer laser surgery.

    PubMed

    Lekhanont, Kaevalin; Nonpassopon, Manachai; Wannarosapark, Khemruetai; Chuckpaiwong, Varintorn

    2015-01-01

    The purpose of this study was to investigate the agreement between the clinical history method (CHM), Orbscan IIz, and Pentacam in estimating corneal power after myopic excimer laser surgery. Fifty five patients who had myopic LASIK/PRK were recruited into this study. One eye of each patient was randomly selected by a computer-generated process. At 6 months after surgery, postoperative corneal power was calculated from the CHM, Orbscan IIz total optical power at the 3.0 and 4.0 mm zones, and Pentacam equivalent keratometric readings (EKRs) at 3.0, 4.0, and 4.5 mm. Statistical analyses included multilevel models, Pearson's correlation test, and Bland-Altman plots. The Orbscan IIz 3.0-mm and 4.0 mm total optical power, and Pentacam 3.0-mm, 4.0-mm, and 4.5-mm EKR values had strong linear positive correlations with the CHM values (r = 0.90-0.94, P = <0.001, for all comparisons, Pearson's correlation). However, only Pentacam 3.0-mm EKR was not statistically different from CHM (P = 0.17, multilevel models). The mean 3.0- and 4.0-mm total optical powers of the Orbscan IIz were significantly flatter than the values derived from CHM, while the average EKRs of the Pentacam at 4.0 and 4.5 mm were significantly steeper. The mean Orbscan IIz 3.0-mm total optical power was the lowest keratometric reading compared to the other 5 values. Large 95% LoA was observed between each of these values, particularly EKRs, and those obtained with the CHM. The width of the 95% LoA was narrowest for Orbscan IIz 3.0-mm total optical power. In conclusion, the keratometric values extracted from these 3 methods were disparate, either because of a statistically significant difference in the mean values or moderate agreement between them. Therefore, they are not considered equivalent and cannot be used interchangeably.

  15. Difference in the behavior of oxygen deficient defects in Ge-doped silica optical fiber preforms under ArF and KrF excimer laser irradiation

    NASA Astrophysics Data System (ADS)

    Essid, M.; Brebner, J. L.; Albert, J.; Awazu, K.

    1998-10-01

    Photobleaching of optical absorption bands in the 5 eV region and the creation of others at higher and lower energy have been examined in the case of ArF (6.4 eV) and KrF (5 eV) excimer laser irradiation of 3GeO2:97SiO2 glasses. We report a difference in the transformation process of the neutral oxygen monovacancy and also of the germanium lone pair center (GLPC) into electron trap centers associated with fourfold coordinated Ge ions and Ge-E' centers when we use one or the other laser. Correlations between absorption bands and electron spin resonance signals were made after different steps of laser irradiation. It was found that the KrF laser generates twice as many Ge-E' centers as the ArF laser for the same dose of energy delivered. The main reason for this difference is found to be the more efficient bleaching of the GLPC (5.14 eV) by the KrF laser compared to that by the ArF laser.

  16. Laser-based techniques for living cell pattern formation

    NASA Astrophysics Data System (ADS)

    Hopp, Béla; Smausz, Tomi; Papdi, Bence; Bor, Zsolt; Szabó, András; Kolozsvári, Lajos; Fotakis, Costas; Nógrádi, Antal

    2008-10-01

    In the production of biosensors or artificial tissues a basic step is the immobilization of living cells along the required pattern. In this paper the ability of some promising laser-based methods to influence the interaction between cells and various surfaces is presented. In the first set of experiments laser-induced patterned photochemical modification of polymer foils was used to achieve guided adherence and growth of cells to the modified areas: (a) Polytetrafluoroethylene was irradiated with ArF excimer laser ( λ=193 nm, FWHM=20 ns, F=9 mJ/cm2) in presence of triethylene tetramine liquid photoreagent; (b) a thin carbon layer was produced by KrF excimer laser ( λ=248 nm, FWHM=30 ns, F=35 mJ/cm2) irradiation on polyimide surface to influence the cell adherence. It was found that the incorporation of amine groups in the PTFE polymer chain instead of the fluorine atoms can both promote and prevent the adherence of living cells (depending on the applied cell types) on the treated surfaces, while the laser generated carbon layer on polyimide surface did not effectively improve adherence. Our attempts to influence the cell adherence by morphological modifications created by ArF laser irradiation onto polyethylene terephtalate surface showed a surface roughness dependence. This method was effective only when the Ra roughness parameter of the developed structure did not exceed the 0.1 micrometer value. Pulsed laser deposition with femtosecond KrF excimer lasers ( F=2.2 J/cm2) was effectively used to deposit structured thin films from biomaterials (endothelial cell growth supplement and collagen embedded in starch matrix) to promote the adherence and growth of cells. These results present evidence that some surface can be successfully altered to induce guided cell growth.

  17. Electrical properties of Sb-doped epitaxial SnO2 thin films prepared using excimer-laser-assisted metal-organic deposition

    NASA Astrophysics Data System (ADS)

    Tsuchiya, Tetsuo; Nakajima, Tomohiko; Shinoda, Kentaro

    2013-12-01

    Excimer-laser-assisted metal-organic deposition (ELAMOD) was used to prepare Sb-doped epitaxial (001) SnO2 thin films on (001) TiO2 substrates at room temperature. The effects of laser fluence, the number of shots with the laser, and Sb content on the electrical properties such as resistivity, carrier concentration, and carrier mobility of the films were investigated. The resistivity of the Sb-doped epitaxial (001) SnO2 thin film prepared using an ArF laser was lower than that of the film prepared using a KrF laser. The van der Pauw method was used to measure the resistivity, carrier concentration, and carrier mobility of the Sb-doped epitaxial (001) SnO2 thin films in order to determine the effect of Sb content on the electrical resistivity of the films. The lowest resistivity obtained for the Sb-doped epitaxial (001) SnO2 thin films prepared using ELAMOD with the ArF laser and 2 % Sb content was 2.5 × 10-3 Ω cm. The difference between the optimal Sb concentrations and resistivities of the films produced using either ELAMOD or conventional thermal MOD was discussed.

  18. Excimer Laser Research

    DTIC Science & Technology

    1976-10-01

    Approximate wavelengths of XeF emission near Approximate wave!« ngth (A) Frequency lem ŕ) Relative intensity 2680 37313 vw 2670 37 453 vw 2662 36 5G6...Associates. Inc., P.O. Box 3580, Santa Monica, CA 90431 - Attn: Dr. R. E. LeLevier (1 copy) Rockwell International Corporation, Rocketdyne

  19. Fabrication of 250-nm-hole arrays in glass and fused silica by UV laser ablation

    NASA Astrophysics Data System (ADS)

    Karstens, R.; Gödecke, A.; Prießner, A.; Ihlemann, J.

    2016-09-01

    Parallel nanohole drilling in glass using an ArF excimer laser (193 nm) is demonstrated. For the first time, hole arrays with 500 nm pitch and individual holes with 250 nm diameter and more than 100 nm depth are fabricated by phase mask imaging using a Schwarzschild objective. Holes in soda lime glass are drilled by direct ablation; fused silica is processed by depositing a SiOx-film on SiO2, patterning the SiOx by ablation, and finally oxidizing the remaining SiOx to SiO2. Thermally induced ordered dewetting of noble metal films deposited on such templates may be used for the fabrication of plasmonic devices.

  20. A method of atmospheric density measurements during space shuttle entry using ultraviolet-laser Rayleigh scattering

    NASA Technical Reports Server (NTRS)

    Mckenzie, Robert L.

    1988-01-01

    An analytical study and its experimental verification are described which show the performance capabilities and the hardware requirements of a method for measuring atmospheric density along the Space Shuttle flightpath during entry. Using onboard instrumentation, the technique relies on Rayleigh scattering of light from a pulsed ArF excimer laser operating at a wavelength of 193 nm. The method is shown to be capable of providing density measurements with an uncertainty of less than 1 percent and with a spatial resolution along the flightpath of 1 km, over an altitude range from 50 to 90 km. Experimental verification of the signal linearity and the expected signal-to-noise ratios is demonstrated in a simulation facility at conditions that duplicate the signal levels of the flight environment.

  1. High-performance polycrystalline silicon thin-film transistors with two-dimensional location control of the grain boundary via excimer laser crystallization.

    PubMed

    Wang, Chao-Lung; Lee, I-Che; Wu, Chun-Yu; Liao, Chan-Yu; Cheng, Yu-Ting; Cheng, Huang-Chung

    2012-07-01

    High-performance low-temperature polycrystalline silicon (Poly-Si) thin-film transistors (TFTs) have been fabricated with two-dimensional (2-D) location-controlled grain boundaries using excimer laser crystallization (ELC). By locally increased thickness of the amorphous silicon (a-Si) film that was served as the seed crystals with a partial-melting crystallization scheme, the cross-shaped grain boundary structures were produced between the thicker a-Si grids. The Poly-Si TFTs with one parallel and one perpendicular grain boundary along the channel direction could therefore be fabricated to reach excellent field-effect mobility of 530 cm2/V-s while the conventional ones exhibited field-effect mobility of 198 cm2/V-s. Furthermore, the proposed TFTs achieved not only superior electric properties but also improved uniformity as compared with the conventional ones owing to the artificially controlled locations of grain boundaries.

  2. Transformation of medical grade silicone rubber under Nd:YAG and excimer laser irradiation: First step towards a new miniaturized nerve electrode fabrication process

    NASA Astrophysics Data System (ADS)

    Dupas-Bruzek, C.; Robbe, O.; Addad, A.; Turrell, S.; Derozier, D.

    2009-08-01

    Medical grade silicone rubber, poly-dimethylsiloxane (PDMS) is a widely used biomaterial. Like for many polymers, its surface can be modified in order to change one or several of its properties which further allow this surface to be functionalized. Laser-induced surface modification of PDMS under ambient conditions is an easy and powerful method for the surface modification of PDMS without altering its bulk properties. In particular, we profit from both UV laser inducing surface modification and of UV laser micromachining to develop a first part of a new process aiming at increasing the number of contacts and tracks within the same electrode surface to improve the nerve selectivity of implantable self sizing spiral cuff electrodes. The second and last part of the process is to further immerse the engraved electrode in an autocatalytic Pt bath leading in a selective Pt metallization of the laser irradiated tracks and contacts and thus to a functionalized PDMS surface. In the present work, we describe the different physical and chemical transformations of a medical grade PDMS as a function of the UV laser and of the irradiation conditions used. We show that the ablation depths, chemical composition, structure and morphology vary with (i) the laser wavelength (using an excimer laser at 248 nm and a frequency-quadrupled Nd:YAG laser at 266 nm), (ii) the conditions of irradiation and (iii) the pulse duration. These different modified properties are expected to have a strong influence on the nucleation and growth rates of platinum which govern the adhesion and the thickness of the Pt layer on the electrodes and thus the DC resistance of tracks.

  3. Assessment of expressions of heat shock protein (HSP 72) and apoptosis after ArF excimer laser ablation of the cornea.

    PubMed

    Ishihara, Miya; Sato, Masato; Sato, Shunichi; Arai, Tsunenori; Obara, Minoru; Kikuchi, Makoto

    2004-01-01

    We immunohistochemically studied expressions of inducible heat shock protein 70 (HSP 72) and apoptosis of corneas ablated with an ArF excimer laser. The temperature of corneal surfaces and laser-induced optical emission spectra were measured in real time as direct physical parameters related to the ablation mechanism. To the best of the authors' knowledge, there have been no experimental studies regarding the influence of physical parameters directly related to the ablation mechanism on corneal reactions at the cell level after laser ablation. The expression of HSP 72 was mainly localized in the regenerative epithelium, which was confirmed to be caused by laser ablation. The HSP 72 positive cell ratios had a correlation with thermal dose, which was derived from the measured time courses of temperature. Expressions of both HSP 72 and apoptosis depended on the thermal dose and elapsed time after ablation. HSP 72 and apoptosis could be seen up to a few hundred micrometers into the stroma, only at a fluence with an optical breakdown emission. This could have been caused by shock waves induced by the optical breakdown.

  4. Hollow light guide and optical fiber for UV laser transmission

    NASA Astrophysics Data System (ADS)

    Kubo, Uichi; Hashishin, Yuichi; Nakano, Hitoshi; Tanaka, Hiroyuki

    1997-12-01

    The applications of ultraviolet lasers in medicine and surgery are expected to produce new therapies since UV laser is strongly absorbed by lipids, proteins and nucleic acids. The suitable tools for the UV laser power delivery, however, have not been developed yet. In an effort to make efficient delivery of UV laser, we have proposed hollow light guide which consists of an aluminum-phosphor bronze reflector and a teflon E-type rail spacer. The delivery characteristics of the hollow light guide have been investigated using the ArF and KrF excimer lasers. In case of the KrF laser, the transmittance and delivery energy reached 77%/m and 110 mJ/pulse, respectively. In the ArF laser, the transmittance and delivery energy were obtained to be 56%/m and 40 mJ/pulse, respectively. It is known that 193 nm radiation by the ArF laser are absorbed by the air. Thus, the ArF laser beam delivery were examined in the helium gas. The transmittance and the delivery energy were obtained to be 72%/m and 50 mJ/pulse using helium-filled hollow light guide, which were greatly improved for comparison with the case of the air. We have also tried the quartz fiber with OH ion doped core. The effects of a lightly doped core with Cl and a clad with B-F on the laser transmittance have been investigated. In these result, the Cl was not good core dopant. The B and F were useful clad dopants for the excimer laser transmission.

  5. Hollow light guide and optical fiber for UV laser transmission

    NASA Astrophysics Data System (ADS)

    Kubo, Uichi; Hashishin, Yuichi; Nakano, Hitoshi; Tanaka, Hiroyuki

    1998-01-01

    The applications of ultraviolet lasers in medicine and surgery are expected to produce new therapies since UV laser is strongly absorbed by lipids, proteins and nucleic acids. The suitable tools for the UV laser power delivery, however, have not been developed yet. In an effort to make efficient delivery of UV laser, we have proposed hollow light guide which consists of an aluminum-phosphor bronze reflector and a teflon E-type rail spacer. The delivery characteristics of the hollow light guide have been investigated using the ArF and KrF excimer lasers. In case of the KrF laser, the transmittance and delivery energy reached 77%/m and 110 mJ/pulse, respectively. In the ArF laser, the transmittance and delivery energy were obtained to be 56%/m and 40 mJ/pulse, respectively. It is known that 193 nm radiation by the ArF laser are absorbed by the air. Thus, the ArF laser beam delivery were examined in the helium gas. The transmittance and the delivery energy were obtained to be 72%/m and 50 mJ/pulse using helium-filled hollow light guide, which were greatly improved for comparison with the case of the air. We have also tried the quartz fiber with OH ion doped core. The effects of a lightly doped core with Cl and a clad with B-F on the laser transmittance have been investigated. In these result, the Cl was not good core dopant. The B and F were useful clad dopants for the excimer laser transmission.

  6. F 2 excimer laser (157 nm) radiation modification and surface ablation of PHEMA hydrogels and the effects on bioactivity: Surface attachment and proliferation of human corneal epithelial cells

    NASA Astrophysics Data System (ADS)

    Zainuddin; Chirila, Traian V.; Barnard, Zeke; Watson, Gregory S.; Toh, Chiong; Blakey, Idriss; Whittaker, Andrew K.; Hill, David J. T.

    2011-02-01

    Physical and chemical changes at the surface of poly(2-hydroxyethyl methacrylate) (PHEMA) hydrogels modified by ablation with an F 2 excimer laser were investigated experimentally. An important observation was that only the outer exposed surface layers of the hydrogel were affected by the exposure to 157 nm radiation. The effect of the surface changes on the tendency of cells to adhere to the PHEMA was also investigated. A 0.5 cm 2 area of the hydrogel surfaces was exposed to laser irradiation at 157 nm to fluences of 0.8 and 4 J cm -2. The changes in surface topography were analysed by light microscopy and atomic force microscopy, while the surface chemistry was characterized by attenuated total reflection infrared and X-ray photoelectron spectroscopies. Cell-interfacial interactions were examined based on the proliferation of human corneal limbal epithelial (HLE) cells cultured on the laser-modified hydrogels, and on the unexposed hydrogels and tissue culture plastic for comparison. It was observed that the surface topography of laser-exposed hydrogels showed rippled patterns with a surface roughness increasing at the higher exposure dose. The changes in surface chemistry were affected not only by an indirect effect of hydrogen and hydroxyl radicals, formed by water photolysis, on the PHEMA, but also by the direct action of laser radiation on PHEMA if the surface layers of the gel become depleted of water. The laser treatment led to a change in the surface characteristics, with a lower concentration of ester side-chains and the formation of new oxygenated species at the surface. The surface also became more hydrophobic. Most importantly, the surface chemistry and the newly created surface topographical features were able to improve the attachment, spreading and growth of HLE cells.

  7. Measurements of nanoparticle size distribution produced by laser ablation of tungsten and boron-carbide in N 2 ambient

    NASA Astrophysics Data System (ADS)

    Bereznai, Miklós; Heszler, Péter; Tóth, Zsolt; Wilhelmsson, Ola; Boman, Mats

    2006-04-01

    Nanoparticles (NPs) were produced by ablating tungsten and boron-carbide (B 4C) target materials in atmospheric pressure nitrogen ambient using ArF excimer laser pulses. The size distributions of the NPs formed during the ablation were monitored—within a 7-133 nm size window—by a condensation particle counter connected to a differential mobility analyzer. The laser repetition rate was varied between 1-50 Hz, and the fluence was systematically changed in the range of 0.5-15 J/cm 2, for both materials, allowing a comparative study in an extended laser parameter regime. The multishot ablation threshold ( Φth) of B 4C was determined to be ˜1.9 J/cm 2 for the laser used (ArF excimer, λ = 193 nm). Similarly to earlier studies, it was shown that the size distributions consist of mainly small nanoparticles (<˜20 nm) attributed to a non-thermal ablation mechanism below Φth. An additional broad peak appears (between 20 and 40 nm) above Φth as a consequence of the thermally induced macroscopic ablation. Chemical composition of deposited polydisperse nanoparticles was studied by X-ray photoelectron spectroscopy showing nitrogen incorporation into the boron-carbide.

  8. Effect of excimer laser annealing on a-InGaZnO thin-film transistors passivated by solution-processed hybrid passivation layers

    NASA Astrophysics Data System (ADS)

    Bermundo, Juan Paolo; Ishikawa, Yasuaki; Fujii, Mami N.; Nonaka, Toshiaki; Ishihara, Ryoichi; Ikenoue, Hiroshi; Uraoka, Yukiharu

    2016-01-01

    We demonstrate the use of excimer laser annealing (ELA) as a low temperature annealing alternative to anneal amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) passivated by a solution-processed hybrid passivation layer. Usually, a-IGZO is annealed using thermal annealing at high temperatures of up to 400 °C. As an alternative to high temperature thermal annealing, two types of ELA, XeCl (308 nm) and KrF (248 nm) ELA, are introduced. Both ELA types enhanced the electrical characteristics of a-IGZO TFTs leading to a mobility improvement of ~13 cm2 V-1 s-1 and small threshold voltage which varied from ~0-3 V. Furthermore, two-dimensional heat simulation using COMSOL Multiphysics was used to identify possible degradation sites, analyse laser heat localization, and confirm that the substrate temperature is below 50 °C. The two-dimensional heat simulation showed that the substrate temperature remained at very low temperatures, less than 30 °C, during ELA. This implies that any flexible material can be used as the substrate. These results demonstrate the large potential of ELA as a low temperature annealing alternative for already-passivated a-IGZO TFTs.

  9. Raman Shifting a Tunable ArF Excimer Laser to Wavelengths of 190 to 240 nm With a Forced Convection Raman Cell

    NASA Technical Reports Server (NTRS)

    Balla, R. Jeffrey; Herring, G. C.

    2000-01-01

    Tunable radiation, at ultraviolet wavelengths, is produced by Raman shifting a modified 285-mJ ArF excimer laser. Multiple Stokes outputs are observed in H2, CH4, D2, N2, SF6, and CF4 (20, 22, 53, 21, 2.1, and 0.35 percent, respectively). Numbers in parentheses are the first Stokes energy conversion efficiencies. We can access 70 percent of the frequency range 42000-52000 cm (exp -1) (190-240 nm) with Stokes energies that vary from 0.2 microJoule to 58 mJ inside the Raman cell. By using 110 mJ of pump energy and D 2 , the tunable first Stokes energy varies over the 29-58 mJ range as the wavelength is tuned over the 204-206 nm range. Dependence on input energy, gas pressure, He mixture fraction, and circulation of the gas in the forced convection Raman cell is discussed; Stokes conversion is also discussed for laser repetition rates from 1 to 100 Hz. An empirical equation is given to determine whether forced convection can improve outputs for a given repetition rate.

  10. The thermodynamic response of soft biological tissues to pulsed ultraviolet laser irradiation.

    PubMed Central

    Venugopalan, V; Nishioka, N S; Mikić, B B

    1995-01-01

    The physical mechanisms that enable short pulses of high-intensity ultraviolet laser radiation to remove tissue, in a process known as laser ablation, remain obscure. The thermodynamic response of biological tissue to pulsed laser irradiation was investigated by measuring and subsequently analyzing the stress transients generated by pulsed argon fluorine (ArF, lambda = 193 nm) and krypton fluorine (KrF, lambda = 248 nm) excimer laser irradiation of porcine dermis using thin-film piezoelectric transducers. For radiant exposures that do not cause material removal, the stress transients are consistent with rapid thermal expansion of the tissue. At the threshold radiant exposure for ablation, the peak stress amplitude generated by 248 nm irradiation is more than an order of magnitude larger than that produced by 193 nm irradiation. For radiant exposures where material removal is achieved, the temporal structure of the stress transient indicates that the onset of material removal occurs during irradiation. In this regime, the variation of the peak compressive stress with radiant exposure is consistent with laser-induced rapid surface vaporization. For 193 nm irradiation, ionization of the ablated material occurs at even greater radiant exposures and is accompanied by a change in the variation of peak stress with radiant exposure consistent with a plasma-mediated ablation process. These results suggest that absorption of ultraviolet laser radiation by the extracellular matrix of tissue leads to decomposition of tissue on the time scale of the laser pulse. The difference in volumetric energy density at ablation threshold between the two wavelengths indicates that the larger stresses generated by 248 nm irradiation may facilitate the onset of material removal. However, once material removal is achieved, the stress measurements demonstrate that energy not directly responsible for target decomposition contributes to increasing the specific energy of the plume (and plasma

  11. Excimer laser in myocardial infarction: a comparison between STEMI patients with established Q-wave versus patients with non-STEMI (non-Q).

    PubMed

    Topaz, On; Ebersole, Douglas; Dahm, Johannes B; Alderman, Edwin L; Madyoon, Hooman; Vora, Kishor; Baker, John D; Hilton, David; Das, Tony

    2008-01-01

    Patients sustaining acute myocardial infarction (AMI) often require urgent percutaneous revascularization within the first 24 h from onset of the infarction due to continuous ischemia and hemodynamic instability. Upon arrival to the cardiac catheterization, the electrocardiogram of AMI patients may exhibit acute ST-elevation (STEMI) with or without accompanying Q-wave or depression of the ST segment (non-STEMI or non-Q-wave infarction). Data comparing acute outcome of device application in patients presenting for urgent revascularization with established Q-wave myocardial infarction (QWMI) versus those with non-STEMI (NQMI) are sparse. Excimer laser is a revascularization modality applied for debulking of atherosclerotic plaque and vaporization of associated thrombus in the setting of AMI. One hundred fifty-one AMI patients with continuous chest pain and ischemia who enrolled into a multicenter study and underwent urgent revascularization were divided for the purpose of a retrospective analysis into two groups. One group presented with established electrocardiographic Q-wave, whereas the other had ST-depression (NQMI). In comparison with the NQMI group, the QWMI patients had a higher incidence of failed thrombolytic therapy (17% vs 3, p = 0.006), cardiogenic shock (20 vs 6%, p = 0.01), left anterior descending as a culprit infarct-related vessel (46 vs 14%, p < 0.0001), a higher incidence of TIMI 0 flow (48 vs 24%, p = 0.04), a heavier thrombus burden (grade 4 TIMI thrombus, 58 vs 23%; p = 0.0001), and higher CPK (1272 +/- 2180 vs 404 +/- 577, p = 0.001) and troponin levels (62 +/- 95 vs 14 +/- 48, p = 0.0003). Both groups underwent laser angioplasty and stenting for relief of continuous chest pain and ischemia within 24 h of infarction onset. Quantitative coronary arteriography in an independent core laboratory measured similar improvement in baseline minimal luminal diameter and percent diameter stenosis by application of laser energy in both groups. Among the

  12. Surface 3D Micro Free Forms: Multifunctional Microstructured Mesoporous α-Alumina by in Situ Slip Casting Using Excimer Laser Ablated Polycarbonate Molds.

    PubMed

    Rowthu, Sriharitha; Böhlen, Karl; Bowen, Paul; Hoffmann, Patrik

    2015-11-11

    Ceramic surface microstructuring is a rapidly growing field with a variety of applications in tribology, wetting, biology, and so on. However, there are limitations to large-area microstructuring and fabrication of three-dimensional (3D) micro free forms. Here, we present a route to obtain intricate surface structures through in situ slip casting using polydimethylsiloxane (PDMS) negative molds which are replicated from excimer laser ablated polycarbonate (PC) master molds. PC sheets are ablated with a nanosecond KrF (λ = 248 nm) excimer laser mask projection system to obtain micron-scale 3D surface features over a large area of up to 3 m(2). Complex surface structures that include 3D free forms such as 3D topography of Switzerland, shallow structures such as diffractive optical elements (60 nm step) and conical micropillars have been obtained. The samples are defect-free produced with thicknesses of up to 10 mm and 120 mm diameter. The drying process of the slip cast alumina slurry takes place as a one-dimensional process, through surface evaporation and water permeation through the PDMS membrane. This allows homogeneous one-dimensional shrinkage during the drying process, independent of the sample's lateral dimensions. A linear mass diffusion model has been proposed to predict and explain the drying process of these ceramic colloidal suspensions. The calculated drying time is linearly proportional to the height of the slurry and the thickness of the negatively structured PDMS and is validated by the experimental results. An experimentally observed optimum Sylgard PDMS thickness range of ∼400 μm to 1 mm has achieved the best quality microstructured green compacts. Further, the model predicts that the drying time is independent of the microstructured areas and was validated using experimental observations carried out with microstructured areas of 300 mm(2), 1200 mm(2), and 120 cm(2). Therefore, in principle, the structures can be further replicated in areas up

  13. Coaxial HgI excimer lamps

    SciTech Connect

    Malinin, A N; Polyak, A V; Guivan, N N; Shimon, Lyudvik L; Zubrilin, N G

    2002-02-28

    The emission of coaxial HgI excimer lamps pumped by a repetitively pulsed barrier discharge is experimentally studied. The stable operation of the excimer lamps was demonstrated at pump-pulse repetition rates from 0.5 to 12 kHz, and the average emission power attained of 0.6 W at 444 nm. It was found that upon an addition of 0.8% of xenon to the mixture of helium and mercury diiodide, the pulse and average emission powers increased by 30%. The emission power reduced by 5% after 2.5 x 10{sup 6} pulses. An interpretation of the results of optimising the excimer lamp characteristics is given. (laser applications and other topics in quantum electronics)

  14. Nano-crystallization in ZnO-doped In2O3 thin films via excimer laser annealing for thin-film transistors

    NASA Astrophysics Data System (ADS)

    Fujii, Mami N.; Ishikawa, Yasuaki; Ishihara, Ryoichi; van der Cingel, Johan; Mofrad, Mohammad R. T.; Bermundo, Juan Paolo Soria; Kawashima, Emi; Tomai, Shigekazu; Yano, Koki; Uraoka, Yukiharu

    2016-06-01

    In a previous work, we reported the high field effect mobility of ZnO-doped In2O3 (IZO) thin film transistors (TFTs) irradiated by excimer laser annealing (ELA) [M. Fujii et al., Appl. Phys. Lett. 102, 122107 (2013)]. However, a deeper understanding of the effect of ELA on the IZO film characteristics based on crystallinity, carrier concentrations, and optical properties is needed to control localized carrier concentrations for fabricating self-aligned structures in the same oxide film and to adequately explain the physical characteristics. In the case of as-deposited IZO film used as the channel, a high carrier concentration due to a high density of oxygen vacancies was observed; such a film does not show the required TFT characteristics but can act as a conductive film. We achieved a decrease in the carrier concentration of IZO films by crystallization using ELA. This means that ELA can form localized conductive or semi-conductive areas on the IZO film. We confirmed that the reason for the carrier concentration decrease was the decrease of oxygen-deficient regions and film crystallization. The annealed IZO films showed nano-crystalline phase, and the temperature at the substrate was substantially less than the temperature limit for flexible films such as plastic, which is 50°C. This paves the way for the formation of self-aligned structures and separately formed conductive and semi-conductive regions in the same oxide film.

  15. Cool excimer laser-assisted angioplasty (CELA) and tibial balloon angioplasty (TBA) in management of infragenicular arterial occlusion in critical lower limb ischemia (CLI).

    PubMed

    Sultan, Sherif; Tawfick, Wael; Hynes, Niamh

    2013-04-01

    We aim to compare cool excimer laser-assisted angioplasty (CELA) versus tibial balloon angioplasty (TBA) in patients with critical limb ischemia (CLI) with tibial artery occlusive disease. The primary end point is sustained clinical improvement (SCI) and amputation-free survival (AFS). The secondary end points are binary restenosis, target extremity revascularization (TER), and cost-effectiveness. From June 2005 to October 2010, 1506 patients were referred with peripheral vascular disease and 572 with CLI. A total of 80 patients underwent 89 endovascular revascularizations (EVRs) for tibial occlusions, 47 using TBA and 42 using CELA. All patients were Rutherford category 4 to 6. Three-year SCI was enhanced with CELA (81%) compared to TBA (63.8%; P = .013). Three-year AFS significantly improved with CELA (95.2%) versus TBA (89.4%; P = .0165). Three-year freedom from TER was significantly improved with CELA (92.9%) versus 78.7% TBA (P = .026). Three-year freedom from MACE was comparable in both the groups (P = .455). Patients with CELA had significantly improved quality time without symptoms of disease or toxicity of treatment (Q-TWiST) at 3 years (10.5 months; P = .048) with incremental cost of €2073.19 per quality-adjusted life year gained. Tibial EVR provides exceptional outcome in CLI. The CELA has superior SCI, AFS, and freedom from TER, with improved Q-TWiST and cost-effectiveness.

  16. Preliminary results of tracked photorefractive keratectomy (T-PRK) for mild to moderate myopia with the autonomous technologies excimer laser at Cedars-Sinai Medical Center

    NASA Astrophysics Data System (ADS)

    Maguen, Ezra I.; Salz, James J.; Nesburn, Anthony B.

    1997-05-01

    Preliminary results of the correction of myopia up to -7.00 D by tracked photorefractive keratectomy (T-PRK) with a scanning and tracking excimer laser by Autonomous Technologies are discussed. 41 eyes participated (20 males). 28 eyes were evaluated one month postop. At epithelization day mean uncorrected vision was 20/45.3. At one month postop, 92.8 of eyes were 20/40 and 46.4% were 20/20. No eye was worse than 20/50. 75% of eyes were within +/- 0.5 D of emmetropia and 82% were within +/- 1.00 D of emmetropia. Eyes corrected for monovision were included. One eye lost 3 lines of best corrected vision, and had more than 1.00 D induced astigmatism due to a central corneal ulcer. Additional complications included symptomatic recurrent corneal erosions which were controlled with topical hypertonic saline. T-PRK appears to allow effective correction of low to moderate myopia. Further study will establish safety and efficacy of the procedure.

  17. RN12 and RN30 Epidote anlayses

    DOE Data Explorer

    Andrew Fowler

    2015-01-01

    Results for laser ablation measurement of reare earth elments and electron microprobe analysis of major elments in hydrothermal epidote. Laser ablation measurements were completed using an Agilent 7700 quadrupole ICP-MS coupled with 193nm Photon Instruments Excimer laser.

  18. Surface analysis of the selective excimer laser patterning of a thin PEDOT:PSS film on flexible polymer films

    NASA Astrophysics Data System (ADS)

    Schaubroeck, David; De Smet, Jelle; Willems, Wouter; Cools, Pieter; De Geyter, Nathalie; Morent, Rino; De Smet, Herbert; Van Steenbeerge, Geert

    2016-07-01

    Fast patterning of highly conductive polymers like PEDOT:PSS (poly (3,4-ethylene dioxythiophene): polystyrene sulfonate) with lasers can contribute to the development of industrial production of liquid crystal displays on polymer foils. In this article, the selective UV laser patterning of a PEDOT:PSS film on flexible polymer films is investigated. Based on their optical properties, three polymer films are investigated: polyethylene terephthalate (PET), polymethyl methacrylate (PMMA) and cellulose triacetate (TAC). Ablation parameters for a 110 nm PEDOT:PSS film on these polymer films are optimized. A detailed study of the crater depth, topography and surface composition are provided using optical profilometry, scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS), respectively. The electrical insulation of the lines is measured and correlated to the crater analyses for different laser settings. Finally, potential ablation parameters for each of the polymer films are derived.

  19. Surface foaming of collagen, chitosan and other biopolymer films by KrF excimer laser ablation in the photomechanical regime

    NASA Astrophysics Data System (ADS)

    Lazare, S.; Tokarev, V.; Sionkowska, A.; Wiśniewski, M.

    2005-08-01

    Collagen, an important material made of a protein of the extracellular matrix, was extracted from rat tail tendons by acetic acid dissolution, and dry glassy films (15% water content) with smooth surfaces were casted from the solution with a thickness of ˜25 μm. Collagen and similar biopolymer films surface were exposed to single pulses of radiation of the KrF laser with increasing fluence. A white damaged area appears on the treated surface at a threshold of 0.5 J/cm2 with a single pulse and becomes more visible for higher fluence. SEM and profilometry of the ablated surface displays an important swelling (˜5 7 μm) and a microscopic foam structure indicative of the laser induced expansion of the excited material. This process is due to the explosive ablation (a critical phenomenon also called explosive boiling or phase explosion) of the irradiated material and produces upon laser heating a high concentration of bubbles within the polymer because of the relatively large absorption depth (20 μm) and the presence of a large amount of water in the material. Further bubble colliding and bursting produces a three-dimensional polymer micro-foam with interconnected pores. This is the first this result has been reported. The laser induced micro-foam may display some interesting properties for new applications.

  20. Hydrogen Migration and Vinylidene Pathway for Formation of Methane in the 193 nm Photodissociation of Propene: CH3CH=CH2 and CD3CD=CD2

    NASA Technical Reports Server (NTRS)

    Zhao, Yi-Lei; Laufer, Allan H.; Halpern, Joshua B.; Fahr, Askar

    2007-01-01

    Photodissociation channels and the final product yields from the 193 nm photolysis of propene-h6 (CH2=CHCH3) and propene-d6 (CD2=CDCD3) have been investigated, employing gas chromatography, mass spectroscopy, and flame ionization (GC/MS/FID) detection methods. The yields of methane as well as butadiene relative to ethane show considerable variations when propene-h6 or propene-d6 are photolyzed. This suggests significant variances in the relative importance of primary photolytic processes and/or secondary radical reactions, occurring subsequent to the photolysis. Theoretical calculations suggest the potential occurrence of an intramolecular dissociation through a mechanism involving vinylidene formation, accompanied by an ethylenic H-migration through the pi-orbitals. This process affects the final yields of methane-h4 versus methane-d4 with respect to other products. The product yields from previous studies of the 193 nm photolysis of methyl vinyl ketone-h6 and -d6 (CH2=CHCOCH3, CD2=CDCOCD3), alternative precursors for generating methyl and vinyl radicals, are compared with the current results for propene.

  1. Photorefractive keratectomy for myopia and myopic astigmatism correction using the WaveLight Allegretto Wave Eye-Q excimer laser system.

    PubMed

    Costa, Esmeralda; Franqueira, Nuno; Rosa, Andreia M; Tavares, Cristina; Quadrado, Maria J; Lobo, Conceição; Murta, Joaquim N

    2014-06-01

    To analyze photorefractive keratectomy (PRK) outcomes in myopia and myopic astigmatism correction using the WaveLight Allegretto Wave Eye-Q(®) excimer laser system (WaveLight Laser Technologie AG, Erlangen, Germany). 222 eyes of 151 patients underwent PRK (mean age 33.5 ± 6.8 years). Pre-operative best spectacle-corrected visual acuity (BSCVA) ranged from 0.4 to -0.1 logMAR (mean -0.03 ± 0.06). Mean spherical equivalent (SE) was -3.29 ± 1.20 D. Efficacy, predictability and safety were evaluated. Minimum follow-up was 3 months. Accountability at 3 and 6 months was 100 and 54 %, respectively (median follow-up 5 months, mean 5.2 ± 2.6 months). At 3 months, mean uncorrected visual acuity (UCVA) was -0.02 ± 0.07 logMAR, BSCVA -0.03 ± 0.05 logMAR, efficacy index 0.98 and safety index 1.02. UCVA was ≥20/16 in 40.1 %, ≥20/20 in 86.5 % and ≥20/25 in 98.2 %. Mean SE was -0.02 ± 0.20 D. Residual refractive error was ± 0.13 D in 81.5 %, ± 0.25 D in 88.7 % and ± 0.50 D in 97.7 %. At 6 months, outcomes were similar: mean UCVA was -0.02 ± 0.07 logMAR, BSCVA -0.03 ± 0.06 logMAR, efficacy index 1.00 and safety index 1.03. UCVA was ≥20/16 in 43.7 %, ≥20/20 in 86.6 % and ≥20/25 in 96.6 %. Mean SE was -0.02 ± 0.17 D. Residual refractive error was ± 0.13 D in 86.6 %, ± 0.25 D in 93.3 % and ± 0.50 D in 98.3 %. Refractive stability was achieved at 3 months. No patient lost more than one line of BSCVA. There were no retreatments. The WaveLight Allegretto Wave Eye-Q is effective, predictable and safe in low-to-moderate myopia and myopic astigmatism PRK correction.

  2. Pulsed laser deposition of pepsin thin films

    NASA Astrophysics Data System (ADS)

    Kecskeméti, G.; Kresz, N.; Smausz, T.; Hopp, B.; Nógrádi, A.

    2005-07-01

    Pulsed laser deposition (PLD) of organic and biological thin films has been extensively studied due to its importance in medical applications among others. Our investigations and results on PLD of a digestion catalyzing enzyme, pepsin, are presented. Targets pressed from pepsin powder were ablated with pulses of an ArF excimer laser ( λ = 193 nm, FWHM = 30 ns), the applied fluence was varied between 0.24 and 5.1 J/cm 2. The pressure in the PLD chamber was 2.7 × 10 -3 Pa. The thin layers were deposited onto glass and KBr substrates. Our IR spectroscopic measurements proved that the chemical composition of deposited thin films is similar to that of the target material deposited at 0.5 and 1.3 J/cm 2. The protein digesting capacity of the transferred pepsin was tested by adapting a modified "protein cube" method. Dissolution of the ovalbumin sections proved that the deposited layers consisted of catalytically active pepsin.

  3. Cold laser technique for cell surgery

    NASA Astrophysics Data System (ADS)

    Palanker, Daniel V.; Ohad, Shoshanit; Lewis, Aaron; Laufer, Neri

    1992-08-01

    A new cell surgery technique has been developed to produce well-defined alterations in cells and tissues without detectable heating and/or other structural damage in the surroundings. The technique involves the use of a 193 nm argon fluoride excimer laser which is guided through a glass pipette filled with a positive air pressure. To demonstrate the method holes were drilled in the zona pellucida of mouse oocytes. The diameter of the drilled hole was determined by the pipette tip size, and its depth by an energy emitted per pulse and number of pulses. Scanning electron microscopy of the drilled mouse oocytes showed uniform, round, well circumscribed holes with sharp edges. Oocytes that had their zona pellucida drilled with this new method fertilized in vitro and developed to the blastocyst stage in a rate similar to that of control group. These results demonstrate the non-perturbing nature of this cold laser microsurgical procedure. In addition to the extension of our results for clinical in vitro fertilization purposes, such as enhancement of fertilization and embryo biopsy, there are wide ranging possible uses of our method in fundamental and applied investigations that require sub-micron accuracy in cellular alteration.

  4. Pulsed laser deposition of compact high adhesion polytetrafluoroethylene thin films

    NASA Astrophysics Data System (ADS)

    Smausz, Tomi; Hopp, Béla; Kresz, Norbert

    2002-08-01

    Polytetrafluoroethylene (PTFE) thin films were prepared from pressed powder pellets via pulsed laser deposition by using ArF (193 nm) excimer laser. The applied laser fluences were in the 1.6-10 J cm-2 range, the substrate temperature was varied between 27°C and 250°C and post-annealing of the films was carried out in air at temperatures between 320°C and 500°C. Films deposited at 250°C substrate temperature were found to be stoichiometric while those prepared at lower temperatures were fluorine deficient. Morphological analyses proved that the film thickness did not significantly depend on the substrate temperature and the post annealing at 500°C resulted in a thickness reduction of approximately 50%. It was demonstrated that the films prepared at 8.2 J cm-2 fluence and annealed at 500°C followed by cooling at 1°C min-1 rate were compact, pinhole-free layers. The adherence of films to the substrates was determined by tensile strength measurements. Tensile strength values up to 2.4 MPa were obtained. These properties are of great significance when PTFE films are fabricated for the purpose of protecting coatings.

  5. Super-high-frequency shielding properties of excimer-laser-synthesized-single-wall-carbon-nanotubes/polyurethane nanocomposite films

    NASA Astrophysics Data System (ADS)

    Aïssa, B.; Laberge, L. L.; Habib, M. A.; Denidni, T. A.; Therriault, D.; El Khakani, M. A.

    2011-04-01

    Electromagnetic shielding attenuation (ESA) properties of carbon nanotubes/polymer nanocomposite films, in the super high frequency (SHF) X-band (7-12 GHz) domain are studied. The nanocomposite films consisted of thermoset polyurethane (PU) resin blended with single-walled carbon nanotubes (SWCNTs) mats, and deposited on fused quartz substrates. Two different approaches were used to achieve the nanocomposite films, namely (i) through the on-substrate "all-laser" growth approach of SWCNTs directly onto substrate, followed by their infiltration by the PU resin, and (ii) by appropriately dispersing the chemically-purified SWCNTs (in the soot form) into the PU matrix and their subsequent deposition onto quartz substrates by means of a solvent casting process. Characterizations of the ESA properties of the developed nanocomposite films show that they exhibit systematically a deep shielding band, centered at around 9.5 GHz, with an attenuation as high as |- 30| dB, recorded for SWCNT loads of 2.5 wt. % and above. A direct correlation is established between the electrical conductivity of the nanocomposite films and their electromagnetic shielding capacity. The SWCNTs/PU nanocomposites developed here are highly promising shielding materials as SHF notch filters, as their ESA capacity largely exceeds the target value of |- 20| dB generally requested for commercial applications.

  6. Super-high-frequency shielding properties of excimer-laser-synthesized-single-wall-carbon-nanotubes/polyurethane nanocomposite films

    SciTech Connect

    Aiessa, B.; Habib, M. A.; Denidni, T. A.; El Khakani, M. A.; Laberge, L. L.; Therriault, D.

    2011-04-15

    Electromagnetic shielding attenuation (ESA) properties of carbon nanotubes/polymer nanocomposite films, in the super high frequency (SHF) X-band (7-12 GHz) domain are studied. The nanocomposite films consisted of thermoset polyurethane (PU) resin blended with single-walled carbon nanotubes (SWCNTs) mats, and deposited on fused quartz substrates. Two different approaches were used to achieve the nanocomposite films, namely (i) through the on-substrate ''all-laser'' growth approach of SWCNTs directly onto substrate, followed by their infiltration by the PU resin, and (ii) by appropriately dispersing the chemically-purified SWCNTs (in the soot form) into the PU matrix and their subsequent deposition onto quartz substrates by means of a solvent casting process. Characterizations of the ESA properties of the developed nanocomposite films show that they exhibit systematically a deep shielding band, centered at around 9.5 GHz, with an attenuation as high as |- 30| dB, recorded for SWCNT loads of 2.5 wt. % and above. A direct correlation is established between the electrical conductivity of the nanocomposite films and their electromagnetic shielding capacity. The SWCNTs/PU nanocomposites developed here are highly promising shielding materials as SHF notch filters, as their ESA capacity largely exceeds the target value of |- 20| dB generally requested for commercial applications.

  7. The SALUT Project: Study of Advanced Laser Techniques for the Uncovering of Polychromed Works of Art

    NASA Astrophysics Data System (ADS)

    van der Snickt, G.; De Boeck, A.; Keutgens, K.; Anthierens, D.

    In order to find out whether the existing laser systems can be employed to remove superimposed layers of paint on secco wall paintings in a selective way, laser tests were carried out on three types of prepared samples simulating three stratigraphies that are frequently encountered in practice. OM, EPMA, colorimetry, μRaman, and FT-IR were used to evaluate the results. It was found that Q-switched Nd:YAG lasers emitting at 1,064nm could be employed to remove unwanted layers of oil paint and limewash, but the treatment of large areas requires implementation of a computer-controlled X-Y-Z station in order to control the parameters. However, the applicability of this technique will remain limited as ablation at the established optimum parameters implied a discoloration of the pigments cinnabar, yellow ochre, and burnt sienna. Moreover, it was observed that no ablation took place when the limewash thickness exceeds 25 μm. Unwanted layers of acrylic could be removed in an efficient way with an excimer laser emitting at 193 nm.

  8. Surface-pattern geometry, topography, and chemical modifications during KrF excimer laser micro-drilling of p-type Si (111) wafers in ambient environment of HCl fumes in air

    NASA Astrophysics Data System (ADS)

    Zakria Butt, Muhammad; Saher, Sobia; Waqas Khaliq, Muhammad; Siraj, Khurram

    2016-11-01

    Eight mirror-like polished p-type Si (111) wafers were irradiated with 100, 200, 300, 400, 800, 1200, 1600, and 2000 KrF excimer laser pulses in ambient environment of HCl fumes in air. The laser parameters were: wavelength = 248 nm, pulse width = 20 ns, pulse energy = 20 mJ, and repetition rate = 20 Hz. For each set of laser pulses, characterization of the rectangular etched patterns formed on target surface was done by optical/scanning electron microscopy, XRD, and EDX techniques. The average etched depth increased with the increase in number of laser pulses from 100 to 2000 in accord with Sigmoidal (Boltzmann) function, whereas the average etch rate followed an exponential decay with the increase in number of laser pulses. However, the etched area, maximum etched depth, and maximum etch rate were found to increase linearly with the number of laser pulses, but the rate of increase was faster for 100-400 laser pulses (region I) than that for 800-2000 laser pulses (region II). The elemental composition for each etched-pattern determined by EDX shows that both O and Cl contents increase progressively with the increase in the number of laser shots in region I. However, in region II both O and Cl contents attain saturation values of about 39.33 wt.% and 0.14 wt.%, respectively. Perforation of Si wafers was achieved on irradiation with 1200-2000 laser pulses. XRD analysis confirmed the formation of SiO2, SiCl2 and SiCl4 phases in Si (111) wafers due to chemical reaction of silicon with both HCl fumes and oxygen in air.

  9. Excimer laser with fluoropolymer lining

    DOEpatents

    Sze, Robert C.

    1982-01-01

    A cavity formed of Teflon to provide extended static fill lifetimes for gases containing halogens. A double cavity configuration provides structural integrity to the inner Teflon cavity by maintaining an identical multi-atmospheric pressure within the outer structural cavity to minimize tension on the Teflon inner cavity. Use of a quantity of the lasing gas in the outer cavity or a constituent of that gas minimizes contamination of the lasing gas.

  10. Efficiency enhancement using ArF laser induced micro/nanostructures on the polymeric layer of solar cell

    NASA Astrophysics Data System (ADS)

    Parvin, P.; Reyhani, A.; Mehrabi, M.; Refahizadeh, M.; Mortazavi, S. Z.; Ranjbar, A.

    2017-02-01

    Here, the solar cell surface is irradiated with ArF excimer laser at 193 nm. This process forms regular micro/nanostructures on the samples, most likely due to the surface resonance phenomena. Laser induced surface rippling in the form of the conical micro/nanostructures or micro/nano-pillars are strongly dependent on the energy dose which induces a great number of micro/nano cavities on the surface. Despite the reflection events are taken into account as the major source of the optical losses, however the laser induced self-micro/nano structuring significantly reduces the spectral reflectivity. It leads to enhance the efficiency of solar cell accordingly. The effect of laser fluence is also investigated as to several forms of the micro/nanostructures are created at various UV doses. Finally, the electrical characterization is carried out based on the current-voltage plots. The surface morphology is analyzed using SEM and the spectral reflectivity is measured by the spectrophotometry, indicating that the current density rises due to the light trapping in micro/nano-cavities.

  11. Online monitoring of nanoparticles formed during nanosecond laser ablation

    NASA Astrophysics Data System (ADS)

    Nováková, Hana; Holá, Markéta; Vojtíšek-Lom, Michal; Ondráček, Jakub; Kanický, Viktor

    2016-11-01

    The particle size distribution of dry aerosol originating from laser ablation of glass material was monitored simultaneously with Laser Ablation - Inductively Coupled Plasma Mass Spectrometry (LA-ICP-MS) analysis and two aerosol spectrometers - Fast Mobility Particle Sizer (FMPS) and Aerodynamic Particle Sizer (APS). The unique combination of LA-ICP-MS and FMPS offers the possibility of measuring the particle size distribution every 1 s of the ablation process in the size range of 5.6-560 nm. APS extends the information about particle concentration in the size range 0.54-17 μm. Online monitoring of the dry aerosol was performed for two ablation modes (spot and line with a duration of 80 s) with a 193 nm excimer laser system, using the glass reference material NIST 610 as a sample. Different sizes of laser spot for spot ablation and different scan speeds for line ablation were tested. It was found that the FMPS device is capable of detecting changes in particle size distribution at the first pulses of spot laser ablation and is suitable for laser ablation control simultaneously with LA-ICP-MS analysis. The studied parameters of laser ablation have an influence on the resulting particle size distribution. The line mode of laser ablation produces larger particles during the whole ablation process, while spot ablation produces larger particles only at the beginning, during the ablation of the intact layer of the ablated material. Moreover, spot ablation produces more primary nano-particles (in ultrafine mode size range < 100 nm) than line ablation. This effect is most probably caused by a reduced amount of large particles released from the spot ablation crater. The larger particles scavenge the ultrafine particles during the line ablation mode.

  12. Laser direct writing of combinatorial libraries of idealized cellular constructs: Biomedical applications

    NASA Astrophysics Data System (ADS)

    Schiele, Nathan R.; Koppes, Ryan A.; Corr, David T.; Ellison, Karen S.; Thompson, Deanna M.; Ligon, Lee A.; Lippert, Thomas K. M.; Chrisey, Douglas B.

    2009-03-01

    The ability to control cell placement and to produce idealized cellular constructs is essential for understanding and controlling intercellular processes and ultimately for producing engineered tissue replacements. We have utilized a novel intra-cavity variable aperture excimer laser operated at 193 nm to reproducibly direct write mammalian cells with micrometer resolution to form a combinatorial array of idealized cellular constructs. We deposited patterns of human dermal fibroblasts, mouse myoblasts, rat neural stem cells, human breast cancer cells, and bovine pulmonary artery endothelial cells to study aspects of collagen network formation, breast cancer progression, and neural stem cell proliferation, respectively. Mammalian cells were deposited by matrix assisted pulsed laser evaporation direct write from ribbons comprised of a UV transparent quartz coated with either a thin layer of extracellular matrix or triazene as a dynamic release layer using CAD/CAM control. We demonstrate that through optical imaging and incorporation of a machine vision algorithm, specific cells on the ribbon can be laser deposited in spatial coherence with respect to geometrical arrays and existing cells on the receiving substrate. Having the ability to direct write cells into idealized cellular constructs can help to answer many biomedical questions and advance tissue engineering and cancer research.

  13. The performance and the characterization of laser ablation aerosol particle time-of-flight mass spectrometry (LAAP-ToF-MS)

    NASA Astrophysics Data System (ADS)

    Gemayel, Rachel; Hellebust, Stig; Temime-Roussel, Brice; Hayeck, Nathalie; Van Elteren, Johannes T.; Wortham, Henri; Gligorovski, Sasho

    2016-05-01

    Hyphenated laser ablation-mass spectrometry instruments have been recognized as useful analytical tools for the detection and chemical characterization of aerosol particles. Here we describe the performances of a laser ablation aerosol particle time-of-flight mass spectrometer (LAAP-ToF-MS) which was designed for aerodynamic particle sizing using two 405 nm scattering lasers and characterization of the chemical composition of single aerosol particle via ablation/ionization by a 193 nm excimer laser and detection in a bipolar time-of-flight mass spectrometer with a mass resolving power of m/Δm > 600.

    We describe a laboratory based optimization strategy for the development of an analytical methodology for characterization of atmospheric particles using the LAAP-ToF-MS instrument in combination with a particle generator, a differential mobility analyzer and an optical particle counter. We investigated the influence of particle number concentration, particle size and particle composition on the detection efficiency. The detection efficiency is a product of the scattering efficiency of the laser diodes and the ionization efficiency or hit rate of the excimer laser. The scattering efficiency was found to vary between 0.6 and 1.9 % with an average of 1.1 %; the relative standard deviation (RSD) was 17.0 %. The hit rate exhibited good repeatability with an average value of 63 % and an RSD of 18 %. In addition to laboratory tests, the LAAP-ToF-MS was used to sample ambient air during a period of 6 days at the campus of Aix-Marseille University, situated in the city center of Marseille, France. The optimized LAAP-ToF-MS methodology enables high temporal resolution measurements of the chemical composition of ambient particles, provides new insights into environmental science, and a new investigative tool for atmospheric chemistry and physics, aerosol science and health impact studies.

  14. Laser doping and metallization of wide bandgap materials: silicon carbide, gallium nitride, and aluminum nitride

    NASA Astrophysics Data System (ADS)

    Salama, Islam Abdel Haleem

    A laser direct write and doping (LDWD) system is designed and utilized for direct metallization and selective area doping in different SiC polytypes, GaN and in dielectrics including AlN. Laser direct metallization in 4H- and 6H-SiC generates metal-like conductive phases that are produced as both rectifying and ohmic contacts without metal deposition. Nd:YAG (lambda = 532, 1064 nm) nanosecond pulsed laser irradiation in SiC induces carbon-rich conductive phases by thermal decomposition of SiC while UV excimer (lambda = 193 nm) laser irradiation produces a silicon-rich phase due to selective carbon photoablation. Linear transmission line method (TLM) pattern is directly fabricated in single crystals SiC by pulsed laser irradiation allowing characterization of the laser fabricated metal-like contacts. Activation of a self focusing effect at the frequency doubled Nd:YAG laser irradiation (lambda = 532 nm) allows to fabricate buried metal like contacts in SiC wafers while maintaining their device-ready surface condition. Gas immersion laser doping (GILD) and laser doping from a molten precursor are utilized to dope both GaN and SiC. Trimethylaluminum (TMAl) and nitrogen are the precursors used to produce p-type and n-type doped SiC; respectively. Nd:YAG and excimer laser nitrogen doping in SiC epilayer and single crystal substrates increases the dopant concentration by two orders of magnitude and produces both deep (500--600 nm) and shallow (50 nm) junctions, respectively. Laser assisted effusion/diffusion is introduced and utilized to dope Al in SiC wafers. Using this technique, a150 nm p-type doped junction is fabricated in semi-insulating 6H- and n-type doped 4H-SiC wafers. Laser-induced p-type doping of Mg in single crystal GaN is conducted using Bis-magnesium dihydrate [Mg(TMHD)2]. Mg concentration and penetration depth up to 10 20--1021 cm-3 and 5mum, respectively are achieved using various laser doping techniques. Laser direct writing and doping (LDWD) is a

  15. Controlled reshaping of the front surface of the cornea through its full-area ablation outside of the optical zone with a Gaussian ArF excimer laser beam

    NASA Astrophysics Data System (ADS)

    Semchishen, A. V.; Semchishen, V. A.

    2014-01-01

    We studied in vitro the response of the topography of the cornea to its full-area laser ablation (the laser beam spot diameter is commensurable with the size of the interface) outside of the central zone with an excimer laser having a Gaussian fluence distribution across the beam. Subject to investigation were the topographically controlled surface changes of the anterior cornea in 60 porcine eyes with a 5 ± 1.25-diopter artificially induced astigmatism, the changes being caused by laser ablation of the stromal collagen in two 3.5-mm-dia. circular areas along the weaker astigmatism axis. Experimental relationships are presented between the actual astigmatism correction and the expected correction for the intact optical zones 1, 2, 3, and 4 mm in diameter. The data for each zone were approximated by the least-squares method with the function d = a + bx. The coefficient b is given with the root-mean-square error. The statistical processing of the data yielded the following results: d = (0.14 ± 0.037)x for the 1-mm-dia. optical zone, (1.10 ± 0.036)x for the 2-mm-dia. optical zone, (1.04 ± 0.020)x for the 3-mm-dia. optical zone, and (0.55 ± 0.04)x for the 4-mm-dia. optical zone. Full astigmatism correction was achieved with ablation effected outside of the 3-mm-dia. optical zone. The surface changes of the cornea are shown to be due not only to the removal of the corneal tissue, but also to the biomechanical topographic response of the cornea to its strain caused by the formation of a dense pseudomembrane in the ablation area.

  16. Spectrum characteristic study of sodium-ethane excimer pairs

    NASA Astrophysics Data System (ADS)

    Hu, Shu; Gai, Baodong; Wang, Pengyuan; Li, Hui; Tan, Yannan; Liu, Jinbo; Guo, Jingwei

    2017-01-01

    Excimer pumped sodium laser (XPNaL) can accurately achieve lasing at 589.16 nm without any complicated control system to reduce the wavelength error, so XPNaL will provide a novel technical system for sodium beacon laser. In this paper, we studied the Na-C2H6 system, which was an efficient excimer pair. We excited the Na-C2H6 system using a pulsed dye laser with wavelength of 553 nm, and measured lifetime of sodium D2 line based on the fluorescence spectra. Meanwhile, we have also detected strong amplified spontaneous emission (ASE) signal in Na-C2H6 system, through the experimental study, the Na-C2H6 system is considered to own the potential to be utilized in high power XPNaL.

  17. Laser Ablation - Accelerator Mass Spectrometry: An Approach for Rapid Radiocarbon Analyses of Carbonate Archives at High Spatial Resolution.

    PubMed

    Welte, Caroline; Wacker, Lukas; Hattendorf, Bodo; Christl, Marcus; Fohlmeister, Jens; Breitenbach, Sebastian F M; Robinson, Laura F; Andrews, Allen H; Freiwald, André; Farmer, Jesse R; Yeman, Christiane; Synal, Hans-Arno; Günther, Detlef

    2016-09-06

    A new instrumental setup, combining laser ablation (LA) with accelerator mass spectrometry (AMS), has been investigated for the online radiocarbon ((14)C) analysis of carbonate records. Samples were placed in an in-house designed LA-cell, and CO2 gas was produced by ablation using a 193 nm ArF excimer laser. The (14)C/(12)C abundance ratio of the gas was then analyzed by gas ion source AMS. This configuration allows flexible and time-resolved acquisition of (14)C profiles in contrast to conventional measurements, where only the bulk composition of discrete samples can be obtained. Three different measurement modes, i.e. discrete layer analysis, survey scans, and precision scans, were investigated and compared using a stalagmite sample and, subsequently, applied to terrestrial and marine carbonates. Depending on the measurement mode, a precision of typically 1-5% combined with a spatial resolution of 100 μm can be obtained. Prominent (14)C features, such as the atomic bomb (14)C peak, can be resolved by scanning several cm of a sample within 1 h. Stalagmite, deep-sea coral, and mollusk shell samples yielded comparable signal intensities, which again were comparable to those of conventional gas measurements. The novel LA-AMS setup allowed rapid scans on a variety of sample materials with high spatial resolution.

  18. A study of high peroxynitrite generated in purge head outlet of charger with continuous supply of superior purification CDA system for 193 nm ArF reticle haze prevention

    NASA Astrophysics Data System (ADS)

    Chu, Fu-Sheng; Chiou, Shean-Hwan

    2008-05-01

    In this study, A phenomenon of high peroxynitrite generated in purge gas in purge head outlet of RSP SMIF-POD Charger was found. A superior purification CDA("CDA" is abbreviated from Clean Dry Air) continuous purge system has been used in 193nm ArF reticle chemical free preservation process for mask Haze control. Ion Chromatography(IC) and Gas Chromatography Mass Spectrometry(thermal desorber GC-MS) methods are used to analyze and verify inorganic ion and volatility organic compound cleanliness of purge gas, respectively. After IC analysis, high nitrate ion concentration was detected in UPW("UPW" is abbreviated from Ultra-Purification Water). As a result of this study, It is confident of presuming that high peroxynitrite contamination in purge gas in purge head outlet was caused by the blow type in-line gas ionizer, high potential(approximate 2KV) needle discharge influence on the inside of purge piping of Charger. After bypass in-line gas ionizer apparatus, the IC analysis result has a tendency towards a diminution in peroxynitrite that nitrate ion was not detected in UPW at all. At the same operation condition, if purge gas replace by superior purification AN2(A Class Nitrogen) and the inference conjectured that high ammonium ion response in UPW would take place. According to our study, superior purification CDA passed through the emitter tip of blow type in-line gas ionizers and under high potential needle discharge influence, high peroxynitrite concentration was generated in purge gas in purge head outlet of Charger. Due to the generation of peroxynitrite ion contamination in purge gas, it was not suitable to apply in the prevention of ESD damage of mask pattern in superior purification CDA(Clean Dry Air) continuous purge system. In this study, we also unexpectedly find that the blow type in-line gas ionizer with thermoplastic conductive tube resulted in purge gas a large number of volatility organic compounds(VOCs) contamination. VOC outgassing was generated

  19. Chromosome mutations and tissue regeneration in the cornea after the UV laser irradiation

    NASA Astrophysics Data System (ADS)

    Razhev, Alexander M.; Bagayev, Sergei N.; Lebedeva, Lidya I.; Akhmametyeva, Elena M.; Zhupikov, Andrey A.

    2003-06-01

    In present paper the findings on chromosome mutations, the nature of damage and the repair of the cornea tissue after UV irradiation by excimer lasers at 193, 223 and 248 nm were made. Structural mutations induced by short-pulses UV irradiation were shown to be similar to spontaneous ones by the type, time of formation in the mitotic cycle and location of acentrics. Ten hours after irradiation of the cornea with doses of 0,09 to 1,5 J/cm2 the incidence of cells with chromosome aberrations increased linearly with dose and amounted to 11,7% at 248 nm, 5,5% at 223 nm and 2,6% at 193 nm per 1 J/cm2. No induced chromosome aberrations occurred 72 hour following irradiation. Within the dose range from 3,0 to 18 J/cm2 the cytogenesis effect of radiation was less manifest than that with the doses mentioned above, the frequency of chromosome aberrations being independent of either radiation wavelength or radiation dose and amounted of 2,5 to 3,0%. Thus, large doses of powerful short-pulse UV radiation are safe according to the structural mutation criterion.

  20. Millimeter-wave detection of free radicals using pulsed laser photolysis

    NASA Astrophysics Data System (ADS)

    Kolbe, W. F.; Leskovar, B.

    1985-08-01

    The application of millimeter-wave microwave spectroscopy to the detection of free radicals and other species generated by pulsed excimer laser photolysis is described. To detect the radical species, a newly developed 140-GHz microwave spectrometer employing a high-Q Fabry-Perot cavity was used. The technique is illustrated by the observation of SO and CS radicals produced by photodissociation at 193 nm of SO2 and CS2, respectively. SO absorption signals from the ground vibrational state transition at 138.17 GHz and the first and second excited vibrational state transitions at 137.28 and 136.45 GHz were measured. CS was detected in several excited vibrational states up to ν=4. Finally, as an example of the application of the technique to chemical kinetic studies, the reaction rate of SO with NO2 was determined. The measured rate coefficient at 298 K of (1.46±0.12)×10-11 cm3 molecule-1 s-1 is in excellent agreement with values reported in other studies. Millimeter-wave spectroscopy is shown to be a sensitive and highly specific probe for the detection of short lived species in gas phase chemical kinetic studies.

  1. Time-resolved infrared diode laser spectroscopy of the ν1 (C O stretch) band of the CoCO radical

    NASA Astrophysics Data System (ADS)

    Ikeda, Seiki; Hikida, Toshihide; Tanaka, Takehiko; Tanaka, Keiichi

    2008-02-01

    Infrared spectrum of the cobalt carbonyl radical CoCO produced by the 193 nm excimer laser photolysis of cobalt tricarbonyl nitrosyl Co(CO) 3NO was observed by time-resolved diode laser spectroscopy. More than 600 lines were identified as belonging to the ν1 (C-O stretch) fundamental band, consisting of the Ω=5/2 and 3/2 subbands, and the associated hot bands 112, 101211, 101311, and 101222. The 2Δi electronic ground state of CoCO was experimentally confirmed. The ν1 band origins are 1974.172582(93) cm -1 and 1973.53178(14) cm -1 for the Ω=5/2 and 3/2 subbands, respectively. The rotational constant in the ground state was determined as B0=4427.146(50) MHz. The centrifugal distortion constant D0=1.1243(68) kHz was obtained for the Ω=5/2 substate of the ground state. The equilibrium rotational constant Be=4435.44(14) MHz was derived, together with the vibration-rotation interaction constants.

  2. Excimer surface treatment to enhance bonding in coated steels

    NASA Astrophysics Data System (ADS)

    Mueller, Robert E.; Olfert, M.; Duley, Walter W.; North, T.; Hood, J.; Sakai, D.

    1996-04-01

    Zinc coated sheet steel in the form of temper rolled galvanize and galvanneal are used extensively in the automotive industry. Through a process of excimer laser surface treatment, we have succeeded in significantly enhancing the adhesion characteristics of these coated steels. The laser treatment is performed by scanning focused excimer laser radiation in a raster pattern over the surface to be bonded. Adhesion tests have been carried out in the form of T peel tests, using either a hot melt nylon resin or an epoxy as the adhesive. An increase in bond strength was observed over a substantial range of surface treatment conditions. The largest improvement observed was more than a factor of three greater than for untreated surfaces. With the improved surface condition, the bond strength became limited by the cohesive strength of the adhesive. The physical structure and chemical composition of the parent and excimer treated surfaces have been examined using scanning electron microscopy and X-ray photoelectron spectroscopy to determine the nature and extent of the changes caused by the surface treatment. The effects of the observed changes on the bonding performance will be discussed. Surfaces have been processed under an inert atmosphere to isolate the effects of physical surface modification and surface oxidation. An attempt will be made to correlate the surface changes with the bonding characteristics and thereby indicate which changes are most beneficial. The ultimate goal is to optimize the surface condition for bonding and maximize the process rate.

  3. Laser-Ablation (U-Th)/He Geochronology

    NASA Astrophysics Data System (ADS)

    Hodges, K.; Boyce, J.

    2003-12-01

    Over the past decade, ultraviolet laser microprobes have revolutionized the field of 40Ar/39Ar geochronology. They provide unprecedented information about Ar isotopic zoning in natural crystals, permit high-resolution characterization of Ar diffusion profiles produced during laboratory experiments, and enable targeted dating of multiple generations of minerals in thin section. We have modified the analytical protocols used for 40Ar/39Ar laser microanalysis for use in (U-Th)/He geochronologic studies. Part of the success of the 40Ar/39Ar laser microprobe stems from fact that measurements of Ar isotopic ratios alone are sufficient for the calculation of a date. In contrast, the (U-Th)/He method requires separate analysis of U+Th and 4He. Our method employs two separate laser microprobes for this process. A target mineral grain is placed in an ultrahigh vacuum chamber fitted with a window of appropriate composition to transmit ultraviolet radiation. A focused ArF (193 nm) excimer laser is used to ablate tapered cylindrical pits on the surface of the target. The liberated material is scrubbed with a series of getters in a fashion similar to that used for 40Ar/39Ar geochronology, and the 4He abundance is determined using a quadrupole mass spectrometer with well-calibrated sensitivity. A key requirement for calculation of the 4He abundance in the target is a precise knowledge of the volume of the ablation pit. This is the principal reason why we employ the ArF excimer for 4He analysis rather than a less-expensive frequency-multiplied Nd-YAG laser; the excimer creates tapered cylindrical pits with extremely reproducible and easily characterized geometry. After 4He analysis, U and Th are measured on the same sample surface using the more familiar technique of laser-ablation inductively coupled plasma mass spectrometry (LA-ICPMS). Our early experiments have been done using a frequency-quintupled Nd-YAG microprobe (213nm), While the need to analyze U+Th and He in separate

  4. Laser surface roughening of PTFE for increased bonding strength

    NASA Astrophysics Data System (ADS)

    Rauh, M.; Ihlemann, J.; Koch, A.

    2007-08-01

    Treatment of pure Teflon (PTFE) with UV laser pulses (193 nm) produces area-selective rough surfaces. These irradiated areas are bondable with ordinary adhesives. The stability of the bonds is about one order of magnitude higher than that of bonds with untreated Teflon.

  5. Purification of silane via laser-induced chemistry

    DOEpatents

    Clark, John H.; Anderson, Robert G.

    1979-01-01

    Impurities such as PH.sub.3, AsH.sub.3, and B.sub.2 H.sub.6 may be removed from SiH.sub.4 by means of selective photolysis with ultraviolet radiation of the appropriate wavelength. An ArF laser operating at 193 nm provides an efficient and effective radiation source for the photolysis.

  6. Interaction of wide band gap single crystals with 248 nm excimer laser radiation. XII. The emission of negative atomic ions from alkali halides

    SciTech Connect

    Kimura, Kenichi; Langford, S. C.; Dickinson, J. T.

    2007-12-01

    Many wide band gap materials yield charged and neutral emissions when exposed to sub-band-gap laser radiation at power densities below the threshold for optical breakdown and plume formation. In this work, we report the observation of negative alkali ions from several alkali halides under comparable conditions. We observe no evidence for negative halogen ions, in spite of the high electron affinities of the halogens. Significantly, the positive and negative alkali ions show a high degree of spatial and temporal overlap. A detailed study of all the relevant particle emissions from potassium chloride (KCl) suggests that K{sup -} is formed by the sequential attachment of two electrons to K{sup +}.

  7. Pulsed U.V. Laser Cleaning Of GaSb Single Crystal Surface In Ultra-High-Vacuum

    NASA Astrophysics Data System (ADS)

    Petit, E. J.; Humblet, V. M.; Brezini, A.; Caudano, R.; Gouskov, A.; Bougnot, G.

    1989-01-01

    Surface modifications induced to GaSb single crystals by pulsed U.V. laser annealing (PLA) in ultra-high-vacuum have been studied. The (111) surfaces of GaSb single crystals were prepared by a mechanical and chemical etching before introducing into vacuum. The samples were subsequently exposed in vacuum to the U.V. radiation (193 nm) of an high power excimer laser. The analysis by Auger electron spectroscopy performed in situ shows that an atomically clean surface (free of native oxides and of carbon pollution) can be achieved by PLA. The effects of the Energy Density (ED) and of the repetition of the PLA are addressed. Superficial topology changes observed in situ by low resolution scanning electron microscopy, and later by optical microscopy, are described too. From our observations we conclude that She antimony oxides begin to decompose noticely when the surface is irradiated with 50 mJ/cm2 laser pulses. Their evaporation explains the onset of the sharp chemical reduction observed at higher fluences. We propose that superficial melting of the GaSb single crystal starts as soon as the laser beam ED reaches 100 mJ/cm . Beyond this fluence the superficial chemical reduction is completed not only by evaporation, but also : - first : by thermal stress induced fracture of the gallium oxide layer and its ejection due to the strong evaporation from the substrate, and, - second : by the gallium oxide dissolution into the melt. The amount of antimony segregated on ple surface becomes important when the surface melts deeply (i.e. at ED superior of 150 mJ/cm2).

  8. An excimer-based FAIMS detector for detection of ultra-low concentration of explosives

    NASA Astrophysics Data System (ADS)

    Chistyakov, Alexander A.; Kotkovskii, Gennadii E.; Sychev, Alexey V.; Perederiy, Anatoly N.; Budovich, V. L.; Budovich, D. V.

    2014-05-01

    A new method of explosives detection based on the field asymmetric ion mobility spectrometry (FAIMS) and ionization by an excimer emitter has been developed jointly with a portable detector. The excimer emitter differs from usual UVionizing lamps by mechanism of emitting, energy and spectral characteristics. The developed and applied Ar2-excimer emitter has the working volume of 1 cm3, consuming power 0.6 W, the energy of photons of about 10 eV (λ=126 nm), the FWHM radiation spectrum of 10 nm and emits more than 1016 photon per second that is two orders of magnitude higher than UV-lamp of the same working volume emits. This also exceeds by an order of magnitude the quantity of photons per second for 10-Hz solid state YAG:Nd3+ - laser of 1mJ pulse energy at λ=266 nm that is also used to ionize the analyte. The Ar2-excimer ionizes explosives by direct ionization mechanism and through ionization of organic impurities. The developed Ar2-excimer-based ion source does not require cooling due to low level discharge current of emitter and is able to work with no repair more than 10000 hrs. The developed excimer-based explosives detector can analyze both vapors and traces of explosives. The FAIMS spectra of the basic types of explosives like trinitrotoluene (TNT), cyclotrimethylenetrinitramine (RDX), dinitrotoluene (DNT), cyclotetramethylenetetranitramine (HMX), nitroglycerine (NG), pentaerythritol tetranitrate (PETN) under Ar2-excimer ionization are presented. The detection limit determined for TNT vapors equals 1x10-14 g/cm3, for TNT traces- 100 pg.

  9. Prevention of distal embolization and no-reflow in patients with acute myocardial infarction and total occlusion in the infarct-related vessel: a subgroup analysis of the cohort of acute revascularization in myocardial infarction with excimer laser-CARMEL multicenter study.

    PubMed

    Dahm, Johannes B; Ebersole, Douglas; Das, Tony; Madyhoon, Hooman; Vora, Kishor; Baker, John; Hilton, David; Topaz, On

    2005-01-01

    To overcome the adverse complications of percutaneous coronary interventions in thrombus laden lesions (i.e., distal embolization, platelet activation, no-reflow phenomenon), mechanical removal of the thrombus or distal embolization protection devices are frequently required. Pulsed-wave ultraviolet excimer laser light at 308 nm can vaporize thrombus, suppress platelet aggregation, and, unlike other thrombectomy devices, ablate the underlying plaque. The following multicenter registry was instituted to evaluate the safety and efficacy of laser ablation in patients presenting with acute myocardial infarction (AMI) complicated by persistent thrombotic occlusions. Patients with AMI and complete thrombotic occlusion of the infarct-related vessel were included in eight participating centers. Patients with further compromising conditions (i.e., cardiogenic shock, thrombolysis failures) were also included. Primary endpoint was procedural respective laser success; secondary combined endpoints were TIMI flow and % stenosis by quantitative coronary analysis and visual assessment at 1-month follow-up. Eighty-four percent of all patients enrolled (n = 56) had a very large thrombus burden (TIMI thrombus scale > or = 3), and 49% were compromised by complex clinical presentation, i.e., cardiogenic shock (21%), degenerated saphenous vein grafts (26%), or thrombolysis failures (5%). Laser success was achieved in 89%, angiographic success in 93%, and the overall procedural success rate was 86%. The angiographic prelaser total occlusion was reduced angiographically to 58% +/- 25% after laser treatment and to 4% +/- 13% final residual stenosis after adjunctive balloon angioplasty and/or stent placement. TIMI flow increased significantly from grade 0 to 2.7 +/- 0.5 following laser ablation (P < 0.001) and 3.0 +/- 0.2 upon completion of the angioplasty procedure (P > 0.001 vs. baseline). Distal embolizations occurred in 4%, no-reflow was observed in 2%, and perforations in 0.6% of cases

  10. Energetics and Radiative Properties of Excimer Lasers

    DTIC Science & Technology

    1981-01-01

    and emission coefficients were undertaken at UTRC (Contracts 10 i ^HHHHRWHBHMi F29601-71-C-0119 and F44620-73-C-0077). These programs based on...probabilities and integrated absorption coefficients for the metal oxide band systems SiO, A10, TiO, FeO, BaO and UO. Additional studies of halide...25 and 26). RHF calculations can be made with relatively large Slater-type orbital ’’STO) basis sets for diatomic molecules with first or second -row

  11. Sodium-Mercury Excimer Laser. Phase 1

    DTIC Science & Technology

    1992-12-01

    Brookline, MA 02146 93-18041 REPORT DOCUMENTATION PAGE FormApproved• OMB No. 0704-0188 Pueiic onl~rmq borUWn lot the, conectacu, o/informatsoe• t...ADDRESS(ES) 8. PERFORMING ORGANIZATION REPORT NUMBER PLEX Corporation 21 Addington Rd. PLEX-003 Brookline, MA 02146 9. SPONSORING/ MONITORING AGENCY

  12. Progress in LA-ICP-MS Microanalysis Using a 200 nm-femtosecond Laser

    NASA Astrophysics Data System (ADS)

    Jochum, K. P.; Stoll, B.; Weis, U.; Jacob, D. E.; Mertz-Kraus, R.; Andreae, M. O.

    2013-12-01

    We have investigated the performance of LA-ICP-MS for the microanalysis of a variety of samples of different matrices using the 200 nm Ti-sapphire based fs-laser ablation system NWR Femto200 combined with the sector-field ICP-MS Thermo Element2. For comparison, we conducted similar experiments with three ns lasers: 193 nm Nd:YAG, 213 nm Nd:YAG, 193 nm ArF excimer. Measurements were performed with different spot sizes (10 - 65 μm), pulse repetition rates (5 - 250 Hz) and energy densities (0.5 - 0.7 Jcm-2) in spot and line scan analysis modes. We applied those settings to well-characterized and homogeneous synthetic silicate, geological, carbonate and phosphate microanalytical reference materials from NIST, USGS, MPI-DING and others. Our investigations show that in the case of UV-fs laser ablation line scan analysis is much more appropriate than spot analysis. In contrast to the ns lasers, fs laser spot analysis is characterized by a strong decrease of ion intensities, presumably caused by the generation of color centers by fs laser pulses [1]. On the other hand, line scan analyses yield uniform and relative high ion intensities so that detection limits for the various elements are similar to ns laser ablation. In LA-ICP-MS, the major limitations regarding measurement accuracy are matrix effects. The experiments demonstrate that in each case the fs data are more reproducible and less matrix-dependent with respect to fractionation factors [2] and mass-load induced matrix effects [3] than the results obtained using the ns lasers. The fractionation factors of refractory, volatile, lithophile and chalcophile elements are unity for the line scan mode and agree within an uncertainty of 1 %, whereas significantly lower, but matrix-independent, values for the volatile elements Pb (0.93 × 0.03) and Zn (0.88 × 0.04) were observed using the spot analysis mode. This implies that calibration can be performed reliably for quite different matrices using certified silicate

  13. A vacuum-ultraviolet laser pulsed field ionization-photoelectron study of sulfur monoxide (SO) and its cation (SO+).

    PubMed

    Lam, Chow-Shing; Wang, Hailing; Xu, Yuntao; Lau, Kai-Chung; Ng, C Y

    2011-04-14

    Vacuum ultraviolet (VUV) laser pulsed field ionization-photoelectron (PFI-PE) spectroscopy has been applied to the study of the sulfur monoxide radical (SO) prepared by using a supersonically cooled radical beam source based on the 193 nm excimer laser photodissociation of SO(2). The vibronic VUV-PFI-PE bands for the photoionization transitions SO(+)(X(2)Π(1∕2); v(+) = 0) ← SO(X(3)Σ(-); v = 0); and SO(+)((2)Π(3∕2); v(+) = 0) ← SO(X(3)Σ(-); v = 0) have been recorded. On the basis of the semiempirical simulation of rotational branch contours observed in these PFI-PE bands, we have obtained highly precise ionization energies (IEs) of 83,034.2 ± 1.7 cm(-1) (10.2949 ± 0.0002 eV) and 83,400.4 ± 1.7 cm(-1) (10.3403 ± 0.0002 eV) for the formation of SO(+)(X(2)Π(1∕2); v(+) = 0) and SO(+)((2)Π(3∕2); v(+) = 0), respectively. The present VUV-PFI-PE measurement has enabled the direct determination of the spin-orbit coupling constant (A(0)) for SO(+)(X(2)Π(1∕2,3∕2)) to be 365.36 ± 0.12 cm(-1). We have also performed high-level ab initio quantum chemical calculations at the coupled-cluster level up to full quadruple excitations and complete basis set (CBS) extrapolation. The zero-point vibrational energy correction, the core-valence electronic correction, the spin-orbit coupling, and the high-level correction are included in the calculation. The IE[SO(+)(X(2)Π(1∕2,3∕2))] and A(0) predictions thus obtained are found to be in remarkable agreement with the experimental determinations.

  14. Optical characterization of 193nm amorphous carbon ARC films

    NASA Astrophysics Data System (ADS)

    Leng, Jingmin; Opsal, Jon; Pois, Heath

    2005-05-01

    In this study, the optical properties of amorphous carbon (aC) ARC films are investigated using an Opti-probe OP7341, and a metrology solution that robustly measures a broad range of process conditions is presented. We find that the aC material is consistent with uni-axial anisotropy, and that this effect may have important implications for photolithography. These results are obtained through the combination of multiple technologies in one tool: spectroscopic ellipsometry (SE); spectroscopic reflectometry or broadband (BB), with a wavelength range of 190-840 nm; single wavelength (673 nm) but multiple incident angle beam profile reflectometry (BPR) and beam profile ellipsometry (BPE), and single wavelength (633nm) absolute ellipsometry (AE). The combination of technologies at multiple angles and wavelengths provides additional optical information and sensitivity not possible with single-technology approaches. A complex wavelength dependent anisotropy model was developed for this analysis, and is compared with a real anisotropy model. The complex anisotropy model and the effective medium approximation (EMA) with two and three components were applied to a set of 12 wafer set with thickness swing aC films in the range of 500-750 Å as well as a second set of 23 pre- and post- etch wafers. The complex anisotropy model clearly has the advantage of best fit the BPR profiles along with the SE Fourier coefficients. The etch rate obtained by the complex anisotropy also showed a much narrower variation as compared with the EMA2 and EMA32 models with the real anisotropy.

  15. Thin bilayer resists for 193-nm and future photolithography II

    NASA Astrophysics Data System (ADS)

    Hishiro, Yoshi; Hyatt, Michael

    2007-03-01

    Bilayer, Si-containing resists are a technique of interest and a strong candidate to replace chemical vapor deposition (CVD) hardmask processes for small critical dimensions (CDs). Previously, we proposed a very thin film approach using bilayer resists for future lithography, defined the requirements for the resists, and demonstrated 55nm transferred patterns with high aspect ratios using 2-beam interferometer exposure. In this paper, we have demonstrated smaller-than- 60nm transferred patterns with a high numerical aperture (NA) scanner, as well as 45nm and 40nm transferred patterns with a 2-beam system using a 20% Si-containing thin bilayer resist. Immersion scanner exposure and a 35nm CD with 2- beam system were also studied.

  16. Combined laser calorimetry and photothermal technique for absorption measurement of optical coatings

    SciTech Connect

    Li Bincheng; Blaschke, Holger; Ristau, Detlev

    2006-08-10

    To the best of our knowledge, a combined sensitive technique employing both laser calorimetry and a surface thermal lens scheme for measuring absorption values of optical coatings is presented for the first time. Laser calorimetric and pulsed surface thermal lens signals are simultaneously obtained with a highly reflecting UV coating sample irradiated at 193 nm. The advantages and potential applications of the combined technique and the experimental factors limiting the measurement sensitivity are discussed.

  17. Combined laser calorimetry and photothermal technique for absorption measurement of optical coatings.

    PubMed

    Li, Bincheng; Blaschke, Holger; Ristau, Detlev

    2006-08-10

    To the best of our knowledge, a combined sensitive technique employing both laser calorimetry and a surface thermal lens scheme for measuring absorption values of optical coatings is presented for the first time. Laser calorimetric and pulsed surface thermal lens signals are simultaneously obtained with a highly reflecting UV coating sample irradiated at 193 nm. The advantages and potential applications of the combined technique and the experimental factors limiting the measurement sensitivity are discussed.

  18. In-Situ Apatite Laser Ablation U-Th-Sm/He Dating, Methods and Challenges

    NASA Astrophysics Data System (ADS)

    Pickering, J. E.; Matthews, W.; Guest, B.; Hamilton, B.; Sykes, C.

    2015-12-01

    In-situ, laser ablation U-Th-Sm/He dating is an emerging technique in thermochronology that has been proven as a means to date zircon and monzonite1-5. In-situ U-Th-Sm/He thermochronology eliminates many of the problems and inconveniences associated with traditional, whole grain methods, including; reducing bias in grain selection based on size, shape and clarity; allowing for the use of broken grains and grains with inclusions; avoiding bad neighbour effects; and eliminating safety hazards associated with dissolution. In-situ apatite laser ablation is challenging due to low concentrations of U and Th and thus a low abundance of radiogenic He. For apatite laser ablation to be effective the ultra-high-vacuum (UHV) line must have very low and consistent background levels of He. To reduce He background, samples are mounted in a UHV stable medium. Our mounting process uses a MicroHePP (Microscope Mounted Heated Platen Press) to press samples into FEP (fluorinated ethylene propylene) bonded to an aluminum backing plate. Samples are ablated using a Resonetics 193 nm excimer laser and liberated He is measured using a quadrupole mass spectrometer on the ASI Alphachron noble gas line; collectively this system is known as the Resochron. The ablated sites are imaged using a Zygo Zescope optical profilometer and ablated pit volume measured using PitVol, a custom MatLab algorithm developed to enable precise and unbiased measurement of the ablated pit geometry. We use the well-characterized Durango apatite to demonstrate the accuracy and precision of the method. He liberated from forty-two pits, having volumes between 1700 and 9000 um3, were measured using the Resochron. The ablated sites were imaged using a Zygo Zescope optical profilometer and ablated pit volume measured using PitVol. U, Th and Sm concentrations were measured by laser ablation and the U-Th-Sm/He age calculated by standard age equation. An age of 33.8±0.31 Ma was determined and compares well with conventional

  19. Laser assisted deposition

    NASA Technical Reports Server (NTRS)

    Dutta, S.

    1983-01-01

    Applications of laser-based processing techniques to solar cell metallization are discussed. Laser-assisted thermal or photolytic maskless deposition from organometallic vapors or solutions may provide a viable alternative to photovoltaic metallization systems currently in use. High power, defocused excimer lasers may be used in conjunction with masks as an alternative to direct laser writing to provide higher throughput. Repeated pulsing with excimer lasers may eliminate the need for secondary plating techniques for metal film buildup. A comparison between the thermal and photochemical deposition processes is made.

  20. Laser-ablation ICP-MS as a tool for whole rock trace element analyses on fused powders

    NASA Astrophysics Data System (ADS)

    Girard, G.; Rooney, T. O.

    2013-12-01

    Here we present an accurate and precise technique for routine trace element analysis of geologic materials by laser-ablation inductively coupled plasma mass spectrometry (LA-ICP-MS). We focus on rock powders previously prepared for X-ray fluorescence by fusion in a Li2B4O7 flux, and subsequently quenched in a Pt mold to form a glass disk. Our method allows for the analysis up to 30 trace elements by LA-ICP-MS using a Photon-Machines Analyte G2 193 nm excimer laser coupled to a Thermo-Fisher Scientific ICAP Q quadrupole ICP-MS. Analyses are run as scans on the surface of the disks. Laser ablation conditions for which trace element fractionation effects are minimal have been empirically determined to be ~ 4 J m-2 fluence, at 10 Hz , and 10 μm s-1 scan speed, using a 110 μm laser beam size. Ablated material is carried into the ICP-MS by a He carrier at a rate of 0.75 L min-1. Following pre-ablation to remove surface particles, samples are ablated for 200 s, of which 140 s are used for data acquisition. At the end of each scan, a gas blank is collected for 30 s. Dwell times for each element vary between 15 and 60 μs, depending on abundance and instrument sensitivity, allowing 120 readings of each element during the data acquisition time window. To correct for variations in the total volume of material extracted by the laser, three internal standards are used, Ca, Fe and Zr. These elements are routinely analyzed by X-ray fluorescence by the Geoanalytical laboratory at Michigan State University with precision and accuracy of <5%. The availability of several internal standards allows for better correction of possible persisting laser ablation fractionation effects; for a particular trace element, we correct using the internal standard that best reproduces its ablation behavior. Our calibration is based on a combination of fused powders of US Geological Survey and Geological Survey of Japan rock standards, NIST SRM 612 glass, and US Geological Survey natural and

  1. Lasers '92; Proceedings of the International Conference on Lasers and Applications, 15th, Houston, TX, Dec. 7-10, 1992

    NASA Technical Reports Server (NTRS)

    Wang, Charles P. (Editor)

    1993-01-01

    Papers from the conference are presented, and the topics covered include the following: x-ray lasers, excimer lasers, chemical lasers, high power lasers, blue-green lasers, dye lasers, solid state lasers, semiconductor lasers, gas and discharge lasers, carbon dioxide lasers, ultrafast phenomena, nonlinear optics, quantum optics, dynamic gratings and wave mixing, laser radar, lasers in medicine, optical filters and laser communication, optical techniques and instruments, laser material interaction, and industrial and manufacturing applications.

  2. Advances in solid state laser technology for space and medical applications

    NASA Technical Reports Server (NTRS)

    Byvik, C. E.; Buoncristiani, A. M.

    1988-01-01

    Recent developments in laser technology and their potential for medical applications are discussed. Gas discharge lasers, dye lasers, excimer lasers, Nd:YAG lasers, HF and DF lasers, and other commonly used lasers are briefly addressed. Emerging laser technology is examined, including diode-pumped lasers and other solid state lasers.

  3. Evidence of CH{sub 2}O (a-tilde{sup 3}A{sub 2}) and C{sub 2}H{sub 4} (a-tilde{sup 3}B{sub 1u}) produced from photodissociation of 1,3-trimethylene oxide at 193 nm

    SciTech Connect

    Lee, S.-H.; Ong, C.-S.; Lee, Yuan T.

    2006-02-21

    We investigated the dissociative ionization of formaldehyde (CH{sub 2}O) and ethene (C{sub 2}H{sub 4}) produced from photolysis of 1,3-trimethylene oxide at 193 nm using a molecular-beam apparatus and vacuum-ultraviolet radiation from an undulator for direct ionization. The CH{sub 2}O (C{sub 2}H{sub 4}) product suffers from severe dissociative ionization to HCO{sup +} (C{sub 2}H{sub 3}{sup +} and C{sub 2}H{sub 2}{sup +}) even though photoionization energy is as small as 9.8 eV. Branching ratios of fragmentation of CH{sub 2}O and C{sub 2}H{sub 4} following ionization are revealed as a function of kinetic energy of products using ionizing photons from 9.8 to 14.8 eV. Except several exceptions, branching ratios of daughter ions increase with increasing photon energy but decrease with increasing kinetic energy. The title reaction produces CH{sub 2}O and C{sub 2}H{sub 4} mostly on electronic ground states but a few likely on triplet states; C{sub 2}H{sub 4} (a-tilde{sup 3}B{sub 1u}) seems to have a yield greater than CH{sub 2}O (a-tilde{sup 3}A{sub 2}). The distinct features observed at small kinetic energies of daughter ions are attributed to dissociative ionization of photoproducts CH{sub 2}O (a-tilde{sup 3}A{sub 2}) and C{sub 2}H{sub 4} (a-tilde{sup 3}B{sub 1u}). The observation of triplet products indicates that intersystem crossing occurs prior to fragmentation of 1,3-trimethylene oxide.

  4. Selective irradiation of radicals for biomedical treatment using vacuum ultraviolet light from an excimer lamp

    NASA Astrophysics Data System (ADS)

    Ono, Ryo; Tokumitsu, Yusuke; Zen, Shungo; Yonemori, Seiya

    2014-10-01

    In plasma medicine, radicals are considered to play important roles. However, the medical effect of each radical, such as OH and O, is unknown. To examine the effect of each radical, selective production of radicals is needed. We developed selective production of radicals for biomedical treatment using a vacuum ultraviolet (VUV) light emitted from an excimer lamp. Selective irradiation of OH radicals can be achieved by irradiating the 172-nm VUV light from a Xe2 excimer lamp to a humid helium flow in a quartz tube. The water molecules are strongly photodissociated by the VUV light to produce OH radicals. A photochemical simulation for the selective OH production is developed to calculate the OH density. The calculated OH density is compared with OH density measured using laser-induced fluorescence (LIF). Selective production of other radicals than OH is also discussed.

  5. Single-Shot Laser Ablation Split-Stream (SS-LASS) Analysis Depth Profiling

    NASA Astrophysics Data System (ADS)

    Kylander-Clark, A. R.; Stearns, M. A.; Viete, D. R.; Cottle, J. M.; Hacker, B. R.

    2014-12-01

    Laser ablation depth profiling of geochronometers—such as zircon, monazite, titanite and rutile—has become popular in recent years as a tool to both determine date vs. depth or trace-element (TE) composition vs. depth; the former allows the dating of thin rims and, potentially, inversion of Pb-loss profiles for thermal histories, whereas the latter can yield insight into changes in PTX or mineral parageneses and inversion of trace-element profiles for thermal histories. In this study, we combine both techniques, enabling simultaneous acquisition of U-Th/Pb isotopic ratios and trace-element compositions, by joining a 193 nm excimer laser to a multi-collector ICP-MS and single-collector ICP-MS. The simultaneous acquisition allows direct shot-by-shot linkage between time and petrology, expanding our ability to understand the evolution of complex geologic systems. We construct each depth profile by capturing the analyte with a succession of individual laser pulses (each ~100 nm deep) . This has two main advantages over a typical time-dependent analysis of a multi-shot routine composed of tens to hundreds of shots and a several μm deep hole. 1) The reference material is analyzed between each shot for a more-accurate standardization of each aliquot of ablated material. 2) There is no mixing of material ablated from successive laser pulses during transmission to the ICP. The method is limited by count rate, which depends on spot size, excavation rate, instrument sensitivity, etc., and, for single-collector ICP, the switching time, which limits the number of elements that can be analyzed and their total counts. We explore the latter theoretically and experimentally to provide insight on both the ideal number of elements to measure and the dwell time in any given sample. Examples of the utility of SS-LASS include the comparison of apparent Pb loss to diffusion profiles of trace elements in rims of metamorphic rutile and titanite, as well as the determination of the

  6. Boron Isotopes Analyses of Carbonates, Phosphates and Silicates by Laser Ablation MC-ICP-MS: the Influence of Sample Matrix

    NASA Astrophysics Data System (ADS)

    Gerdes, A.

    2013-12-01

    Methods for in-situ analyses of boron isotopes by laser ablation MC-ICP-MS, although presented by 3 labs over the last years, are still not routinely applied despite of the growing interest in B isotopes, e.g. in palaeoclimate research. This study evaluates the ability to analyse boron isotopes by laser ablation at levels down to 0.2 ppm in biogenic carbonates as well as in various minerals (e.g., calcit, garnet, cpx, apatite, hematite, quartz, diamond ...) and natural and synthetic glass (NIST, USGS, and MPI-DING). Mounted and polished samples were ablated in a two-volume Helix cell using a RESOlution 193nm Excimer laser coupled to a Thermo-Finnigan Neptune (No. 1, build in 2000). Due to high sensitivity isotope signals were detected using Faraday collectors (1011 Ohm resistors). Analyses were performed as static spots over 25s with diameters of 235 to 7 μm depending on boron concentration, which yield typical 11B signals of about 0.04 (≤ 1ppm; e.g., cherts) to >0.6 V (3wt.%; tourmaline). Therefore, sample amount consumed during analyses range from 1 nanogram to 10 microgram with total analysed B content in the range of 5 to 1000 picogram. For correction of drift and mass fractionation soda-lime glass NIST-612 or NIST-610 were analysed every 30min. The applied method yields for various materials a typical analytical precision and reproducibility (1σ) of the 11B/10B of about 0.5‰ or better at boron concentration of more than 2 ppm. The effect of various parameters such as gas background, surface contamination, cross contamination, spot size, laser energy, and depth drilling will be discussed briefly. However, crucial for in-situ analyse is the evaluation of the accuracy and the influence of the sample matrix on it. Approaches to test this are still hampered by the lack of well-characterized low-B (e.g. <20ppm) reference materiel of different sample matrix. Nevertheless, in contrast to previous studies an effect of sample matrix on the boron isotope ratio was

  7. Hypersonic Wake Diagnostics Using Laser Induced Fluorescence Techniques

    NASA Technical Reports Server (NTRS)

    Mills, Jack L.; Sukenik, Charles I.; Balla, Robert J.

    2011-01-01

    A review of recent research performed in iodine that involves a two photon absorption of light at 193 nm will be discussed, and it's potential application to velocimetry measurements in a hypersonic flow field will be described. An alternative seed atom, Krypton, will be presented as a good candidate for performing nonintrusive hypersonic flow diagnostics. Krypton has a metastable state with a lifetime of approximately 43 s which would prove useful for time of flight measurement (TOF) and a sensitivity to collisions that can be utilized for density measurements. Calculations using modest laser energies and experimental values show an efficiency of excited state production to be on the order of 10(exp -6) for a two photon absorption at 193 nm.

  8. Quasi ?non-destructive? laser ablation-inductively coupled plasma-mass spectrometry fingerprinting of sapphires

    NASA Astrophysics Data System (ADS)

    Guillong, M.; Günther, D.

    2001-07-01

    A homogenized 193 nm excimer laser with a flat-top beam profile was used to study the capabilities of LA-ICP-MS for 'quasi' non-destructive fingerprinting and sourcing of sapphires from different locations. Sapphires contain 97-99% of Al 2O 3 (corundum), with the remainder composed of several trace elements, which can be used to distinguish the origin of these gemstones. The ablation behavior of sapphires, as well as the minimum quantity of sample removal that is required to determine these trace elements, was investigated. The optimum ablation conditions were a fluency of 6 J cm -2, a crater diameter of 120 μm, and a laser repetition rate of 10 Hz. The optimum time for the ablation was determined to be 2 s, equivalent to 20 laser pulses. The mean sample removal was 60 nm per pulse (approx. 3 ng per pulse). This allowed satisfactory trace element determination, and was found to cause the minimum amount of damage, while allowing for the fingerprinting of sapphires. More than 40 isotopes were measured using different spatial resolutions (20-120 μm) and eight elements were reproducibly detected in 25 sapphire samples from five different locations. The reproducibility of the trace element distribution is limited by the heterogeneity of the sample. The mean of five or more replicate analyses per sample was used. Calibration was carried out using NIST 612 glass reference material as external standard. The linear dynamic range of the ICP-MS (nine orders of magnitude) allowed the use of Al, the major element in sapphire, as an internal standard. The limits of detection for most of the light elements were in the μg g -1 range and were better for heavier elements (mass >85), being in the 0.1 μg g -1 range. The accuracy of the determinations was demonstrated by comparison with XRF analyses of the same set of samples. Using the quantitative analyses obtained using LA-ICP-MS, natural sapphires from five different origins were statistically classified using ternary plots and

  9. Excimer ultraviolet sources for thin film deposition: a 15 year perspective

    NASA Astrophysics Data System (ADS)

    Boyd, Ian W.; Liaw, Irving I.

    2010-02-01

    High intensity intensity ultraviolet (UV) and vacuum ultraviolet (VUV) radiation provide a singular dominant narrow-band emission at various wavelengths(λ) between 108 - 351 nm. The use of dielectric-barrier discharges in its embodiment of an excimer lamp as a photon-source provides a novel method to induce surface modification. From its in relatively humble beginnings in ozone generation, the excimer lamp has found new applications in the field of low-temperature processing of surfaces. Herein, a 15 year perspective of work done at the Materials & Devices Group at University College London between 1992 and 2007 is presented. The excimer lamps' application to the modification of surfaces for materials processing include: photo-induced formation of high-κ dielectric thin films and more recently the UV-induced photo-doping of silicon substrates, amongst others. With its robust yet inexpensive setup and flexibility of geometric configurations, they are easily coupled in parallel resulting in the provision of high photon fluxes over large areas. These sources also have an incoherent and almost monochromatic selectivity for application to process chemical pathway specific tasks by simple variation of the discharge gas mixture. These sources are an interesting addition to and an alternative to lasers for scalable industrial applications and have potential for a myriad of applications across different fields.

  10. Laser Ablation in situ (U-Th-Sm)/He and U-Pb Double-Dating of Apatite and Zircon: Techniques and Applications

    NASA Astrophysics Data System (ADS)

    McInnes, B.; Danišík, M.; Evans, N.; McDonald, B.; Becker, T.; Vermeesch, P.

    2015-12-01

    We present a new laser-based technique for rapid, quantitative and automated in situ microanalysis of U, Th, Sm, Pb and He for applications in geochronology, thermochronometry and geochemistry (Evans et al., 2015). This novel capability permits a detailed interrogation of the time-temperature history of rocks containing apatite, zircon and other accessory phases by providing both (U-Th-Sm)/He and U-Pb ages (+trace element analysis) on single crystals. In situ laser microanalysis offers several advantages over conventional bulk crystal methods in terms of safety, cost, productivity and spatial resolution. We developed and integrated a suite of analytical instruments including a 193 nm ArF excimer laser system (RESOlution M-50A-LR), a quadrupole ICP-MS (Agilent 7700s), an Alphachron helium mass spectrometry system and swappable flow-through and ultra-high vacuum analytical chambers. The analytical protocols include the following steps: mounting/polishing in PFA Teflon using methods similar to those adopted for fission track etching; laser He extraction and analysis using a 2 s ablation at 5 Hz and 2-3 J/cm2fluence; He pit volume measurement using atomic force microscopy, and U-Th-Sm-Pb (plus optional trace element) analysis using traditional laser ablation methods. The major analytical challenges for apatite include the low U, Th and He contents relative to zircon and the elevated common Pb content. On the other hand, apatite typically has less extreme and less complex zoning of parent isotopes (primarily U and Th). A freeware application has been developed for determining (U-Th-Sm)/He ages from the raw analytical data and Iolite software was used for U-Pb age and trace element determination. In situ double-dating has successfully replicated conventional U-Pb and (U-Th)/He age variations in xenocrystic zircon from the diamondiferous Ellendale lamproite pipe, Western Australia and increased zircon analytical throughput by a factor of 50 over conventional methods

  11. Ion-molecule processes in lasers

    NASA Technical Reports Server (NTRS)

    Laudenslager, J. B.

    1979-01-01

    Three classes of molecular electronic transition lasers produced by hybrid pumping of high pressure rate gas mixtures are discussed. These are (1) rare gas dimer lasers (such as excited Ar2, Kr2, and Xe2) lasing in the VUV, (2) rare gas halide lasers or excimer lasers (such as KrF, ArF, and XeCl excimers) lasing in the UV, and (3) the charge transfer molecular ion laser (such as N2/+/) lasing in the visible range. Laser excitation methods and kinetic sequences are examined for these lasers.

  12. Concentration, temperature, and density in a hydrogen-air flame by excimer-induced Raman scattering

    NASA Technical Reports Server (NTRS)

    Wehrmeyer, Joseph A.; Bowling, John M.; Pitz, Robert W.

    1988-01-01

    Single-pulse, vibrational Raman scattering (VRS) is an attractive laser diagnostic for the study of supersonic hydrogen-air combustion. The VRS technique gives a complete thermodynamic description of the gas mixture at a point in the reacting flow. Single-pulse, vibrational Raman scattering can simultaneously provide independent measurements of density, temperature, and concentration of each major species (H2, H2O, O2 and N2) in a hydrogen/air turbulent combustor. Also the pressure can be calculated using the ideal gas law. However, single-pulse VRS systems in current use for measurement of turbulent combustion have a number of shortcomings when applied to supersonic flows: (1) slow repetition rate (1 to 5 Hz), (2) poor spatial resolution (0.5x0.3x0.3 cu mm), and (3) marginal time resolution. Most of these shortcomings are due to the use of visible wavelength flash-lamp pumped dye lasers. The advent of UV excimer laser allows the possibility of dramatic improvements in the single-pulse, vibrational Raman scattering. The excimer based VRS probe will greatly improve repetition rate (100 to 500 Hz), spatial resolution (0.1x0.1x0.1 cu mm) and time resolution (30ns). These improvements result from the lower divergence of the UV excimer, higher repetition rate, and the increased Raman cross-sections (15 to 20 times higher) at ultra-violet (UV) wavelengths. With this increased capability, single-pulse vibrational Raman scattering promises to be an ideal non-intrusive probe for the study of hypersonic propulsion flows.

  13. Laser ablation of human atherosclerotic plaque without adjacent tissue injury

    NASA Technical Reports Server (NTRS)

    Grundfest, W. S.; Litvack, F.; Forrester, J. S.; Goldenberg, T.; Swan, H. J. C.

    1985-01-01

    Seventy samples of human cadaver atherosclerotic aorta were irradiated in vitro using a 308 nm xenon chloride excimer laser. Energy per pulse, pulse duration and frequency were varied. For comparison, 60 segments were also irradiated with an argon ion and an Nd:YAG laser operated in the continuous mode. Tissue was fixed in formalin, sectioned and examined microscopically. The Nd:YAG and argon ion-irradiated tissue exhibited a central crater with irregular edges and concentric zones of thermal and blast injury. In contrast, the excimer laser-irradiated tissue had narrow deep incisions with minimal or no thermal injury. These preliminary experiments indicate that the excimer laser vaporizes tissue in a manner different from that of the continuous wave Nd:YAG or argon ion laser. The sharp incision margins and minimal damage to adjacent normal tissue suggest that the excimer laser is more desirable for general surgical and intravascular uses than are the conventionally used medical lasers.

  14. Error analysis of DIAL measurements of ozone by a Shuttle excimer lidar

    NASA Technical Reports Server (NTRS)

    Uchino, Osamu; Mccormick, M. Patrick; Mcmaster, Leonard R.; Swissler, Thomas J.

    1986-01-01

    Attention is given to an error analysis of DIAL measurements of stratospheric ozone from the Space Shuttle. It is shown that a transmitter system consisting of a KrF excimer laser pumping gas cells of H2 or D2 producing output wavelengths in the near UV is useful for the measurement of ozone in a 15-50-km altitude range. It is noted that for increased levels of stratospheric aerosols experienced after violent volcanic eruptions, the relative uncertainties of ozone densities will be large in the region below about 24 km.

  15. EFFECT OF LASER LIGHT ON MATTER. LASER PLASMAS: Optical breakdown of quartz glass by XeF laser radiation

    NASA Astrophysics Data System (ADS)

    Amosov, A. V.; Barabanov, V. S.; Gerasimov, S. Yu; Morozov, Nikolai V.; Sergeev, P. B.; Stepanchuk, V. N.

    1994-04-01

    The bulk optical strengths of KU1 and KUVI quartz glasses were determined for pulses of 85 ns duration at the wavelength of 353 nm. The damage thresholds of these materials were the same and amounted to 280 GW cm-2. The optical breakdown thresholds of KU1 at λ = 248 nm and λ = 193 nm, obtained earlier for the same samples under otherwise identical conditions, were used together with the present results to plot the wavelength dependence of the damage threshold of this material. These results showed that nonlinear absorption is the main mechanism responsible for damage to quartz glass in high-intensity ultraviolet laser radiation fields.

  16. Permanent excimer superstructures by supramolecular networking of metal quantum clusters

    NASA Astrophysics Data System (ADS)

    Santiago-Gonzalez, Beatriz; Monguzzi, Angelo; Azpiroz, Jon Mikel; Prato, Mirko; Erratico, Silvia; Campione, Marcello; Lorenzi, Roberto; Pedrini, Jacopo; Santambrogio, Carlo; Torrente, Yvan; De Angelis, Filippo; Meinardi, Francesco; Brovelli, Sergio

    2016-08-01

    Excimers are evanescent quasi-particles that typically form during collisional intermolecular interactions and exist exclusively for their excited-state lifetime. We exploited the distinctive structure of metal quantum clusters to fabricate permanent excimer-like colloidal superstructures made of ground-state noninteracting gold cores, held together by a network of hydrogen bonds between their capping ligands. This previously unknown aggregation state of matter, studied through spectroscopic experiments and ab initio calculations, conveys the photophysics of excimers into stable nanoparticles, which overcome the intrinsic limitation of excimers in single-particle applications—that is, their nearly zero formation probability in ultra-diluted solutions. In vitro experiments demonstrate the suitability of the superstructures as nonresonant intracellular probes and further reveal their ability to scavenge reactive oxygen species, which enhances their potential as anticytotoxic agents for biomedical applications.

  17. Lasers '87; Proceedings of the Tenth International Conference on Lasers and Applications, Lake Tahoe, NV, Dec. 7-11, 1987

    NASA Astrophysics Data System (ADS)

    Duarte, F. J.

    Various papers on lasers are presented. The general topics addressed include: laser physics and theory, VUV and X-ray lasers, excimer lasers, chemical lasers, nuclear pumped lasers, blue-green and metal-vapor lasers, dye lasers, solid-state lasers, semiconductor and diode lasers, CO2 lasers, FIR lasers, ultrafast phenomena, nonlinear phenomena, wave mixing and dynamic gratings, and phase conjugation. Also considered are: laser radars and remote sensing, adaptive optics and propagation, imaging, fiber optics, laser spectroscopy, laser dyes, lasers in medicine, optical devices and measuring technique, laser industrial applications, lasers in strategic defense.

  18. Gas and metal vapor lasers and applications; Proceedings of the Meeting, Los Angeles, CA, Jan. 22, 23, 1991

    NASA Astrophysics Data System (ADS)

    Kim, Jin J.; Tittel, Frank K.

    Various papers on gas and metal vapor lasers and applications are presented. Individual topics addressed include: high-power copper vapor laser development, modified off-axis unstable resonator for copper vapor laser, industrial applications of metal vapor lasers, newly developed excitation circuit for kHz pulsed lasers, copper vapor laser precision processing, development of solid state pulse power supply for copper vapor laser, multiple spectral structure of the 578.2-nm line for copper vapor laser, adsorption of bromine in CuBr laser, processing of polytetrafluoroethylene with high-power VUV laser radiation, characterization of a subpicosecond XeF(C - A) excimer laser, X-ray preionization for high-repetition-rate discharge excimer lasers. Also discussed are: investigation of microwave-pumped excimer and rare-gas laser transitions, influence of gas composition of XeCl laser performance, output power stabilization of a XeCl excimer laser by HCl gas injection, excimer laser machining of optical fiber taps, diagnostics of a compact UV-preionized XeCl laser with BCl3 halogen donor, blackbody-pumped CO32 lasers using Gaussian and waveguide cavities, chemical problems of high-power sealed-off CO lasers, laser action of Xe and Ne pumped by electron beam, process monitoring during CO2 laser cutting, double-pulsed TEA CO2 laser, superhigh-gain gas laser, high-power ns-pulse iodine laser provided with SBS mirror. (No individual items are abstracted in this volume)

  19. Lasers in dentistry

    NASA Astrophysics Data System (ADS)

    Keller, Ulrich

    1991-11-01

    The infrared-laser systems like the Er:YAG, the cw CO2, the Nd:YAG, and the UV- excimer lasers are being investigated for preparing tooth-hard substances. The infrared lasers cause thermal damage to the enamel, the dentin, and the pulp with the exception of the Er:YAG laser. No thermal damage occurs using the Er:YAG laser under practical conditions because of the special thermomechanical ablation process. The ablation rates of the UV- excimer lasers are to low for practical use. Enhancing the ablation efficiency by high- repetition rates causes thermal side effects to occur. Therefore, only the Er:YAG laser has the potential to partially replace the mechanical drill.

  20. Methods Development for In Situ Laser-Ablation Pb and Sr Isotopic Analyses Using a Double-Focusing Single-Collector ICPMS

    NASA Astrophysics Data System (ADS)

    Pietruszka, A. J.; Neymark, L. A.

    2014-12-01

    Laser-ablation (LA) ICPMS isotopic analyses of Pb and Sr in geological materials have mostly used multi-collector instruments equipped with Faraday-type detectors (e.g., [1-3]). The main limitation of this approach is that samples with relatively high concentrations of Pb and Sr are typically required. Here we present the development of analytical methods for the accurate and precise in situ measurement of Pb and Sr isotope ratios in relatively low-concentration samples using a laser ablation system (193-nm excimer laser) with a double-focusing single-collector (SC) ICPMS (Nu AttoMTM). Our methods build on published techniques [4-6] that used different LA-SC-ICPMS instrumentation to demonstrate the benefits of fast-scanning ion-counting measurements combined with flat-top peaks. We have paid special attention to the characterization and correction of instrumental artifacts using solutions of the NIST SRM981 Pb and SRM987 Sr standards in "wet plasma" mode. For Pb, this includes correcting for the interference of 204Hg on 204Pb, characterizing the effects of tails from thallium (at masses 203 and 205) on the Pb peaks, evaluating the stability of the instrumental mass bias, and maintaining linearity of the detector response over the full dynamic range. For Sr, this includes correcting for the interference of 86Kr on 86Sr and 87Rb on 87Sr, verifying the accuracy of an internal correction for instrumental mass bias, and calibrating the ion optics scanning parameters. LA-SC-ICPMS results for Pb and Sr isotopic measurements of international glass standards and newly developed in-house mineral and glass reference materials will be presented. [1] Davidson et al. (2001) EPSL 184, 427-442. [2] Ramos et al. (2004) Chem. Geol. 211, 135-158. [3] Simon et al. (2007) GCA 71, 2014-2035. [4] Jochum et al. (2005) IJMS 242, 281-289. [5] Jochum et al. (2006) JAAS 21, 666-675. [6] Jochum et al. (2009) JAAS 24, 1237-1243.

  1. Neutron detection by scintillation of noble-gas excimers

    NASA Astrophysics Data System (ADS)

    McComb, Jacob Collin

    Neutron detection is a technique essential to homeland security, nuclear reactor instrumentation, neutron diffraction science, oil-well logging, particle physics and radiation safety. The current shortage of helium-3, the neutron absorber used in most gas-filled proportional counters, has created a strong incentive to develop alternate methods of neutron detection. Excimer-based neutron detection (END) provides an alternative with many attractive properties. Like proportional counters, END relies on the conversion of a neutron into energetic charged particles, through an exothermic capture reaction with a neutron absorbing nucleus (10B, 6Li, 3He). As charged particles from these reactions lose energy in a surrounding gas, they cause electron excitation and ionization. Whereas most gas-filled detectors collect ionized charge to form a signal, END depends on the formation of diatomic noble-gas excimers (Ar*2, Kr*2,Xe* 2) . Upon decaying, excimers emit far-ultraviolet (FUV) photons, which may be collected by a photomultiplier tube or other photon detector. This phenomenon provides a means of neutron detection with a number of advantages over traditional methods. This thesis investigates excimer scintillation yield from the heavy noble gases following the boron-neutron capture reaction in 10B thin-film targets. Additionally, the thesis examines noble-gas excimer lifetimes with relationship to gas type and gas pressure. Experimental data were collected both at the National Institute of Standards and Technology (NIST) Center for Neutron Research, and on a newly developed neutron beamline at the Maryland University Training Reactor. The components of the experiment were calibrated at NIST and the University of Maryland, using FUV synchrotron radiation, neutron imaging, and foil activation techniques, among others. Computer modeling was employed to simulate charged-particle transport and excimer photon emission within the experimental apparatus. The observed excimer

  2. Reduction potential of the sulfhydryl radical: Pulse radiolysis and laser flash photolysis studies of the formation and reactions of {sm_bullet}SH and HSSH{sm_bullet}{sup {minus}} in aqueous solutions

    SciTech Connect

    Das, T.N.; Huie, R.E.; Neta, P.; Padmaja, S.

    1999-07-08

    H{sub 2}S, which is a very toxic gas, has a large number of natural and anthropogenic sources, and the safe removal of this substance has been a matter of ongoing industrial concern. Formation and reactions of the {sm_bullet}SH/{sm_bullet}S{sup {minus}} and HSSH{sm_bullet}{sup {minus}}/HSS{sm_bullet}{sup 2{minus}} radicals in aqueous solutions have been studied by excimer laser flash photolysis and by pulse radiolysis. Acidic H{sub 2}S solutions can be photolyzed with 193 nm laser pulses and produce a transient species with {lambda}{sub max} at 240 nm, ascribed to the {sm_bullet}SH/{sm_bullet}S{sup {minus}} radical. Solutions of SH{sup {minus}} can be photolyzed also with 248 nm laser pulses to produce the {sm_bullet}SH/{sm_bullet}S{sup {minus}} reacts with SH{sup {minus}} ({kappa}{sub f} = 4 {times} 10{sup 9} L/mol s, {kappa}{sub r} = 5 {times} 10{sup 5} s{sup {minus}1}) to form HSSH{sm_bullet}{sup {minus}}/HSS{sm_bullet}{sup 2{minus}}, with {lambda}{sub max} at 380 nm. Both {sm_bullet}SH/{sm_bullet}S{sup {minus}} and HSSH{sm_bullet}{sup {minus}}/HSS{sm_bullet}{sup 2{minus}} react rapidly with O{sub 2}; the former produces SO{sub 2}{sm_bullet}{sup {minus}} ({kappa} = 5 {times} 10{sup 9} L/mol s), and the latter produces O{sub 2}{sm_bullet} ({kappa} = 4 {times} 10{sup 8} L/mol s). Both radicals react with olefinic compounds. The monomeric radical oxidizes Fe(CN){sub 6}{sup 4{minus}}, SO{sub 3}{sup 2{minus}}, ClO{sub 2}{sup {minus}}, and chlorpromazine. The dimeric radical is a weaker oxidant toward ferrocyanide but reduces N-methylpyridinium compounds. The reduction potential for the dimeric radical at pH 7 was determined from one-electron transfer equilibria with Mo(CN){sub 8}{sup 3{minus}} and with the 4-methoxyaniline radical cation and found to be 0.69 V vs NHE. From the equilibrium constant K = [HSS{sm_bullet}{sup 2{minus}}]/[SH{sup {minus}}][{sm_bullet}S{sup {minus}}] = 8 {times} 10{sup 3} L/mol, the reduction potential for ({sm_bullet}S{sup {minus

  3. Mass-Selective Laser Photoionization.

    ERIC Educational Resources Information Center

    Smalley, R. E.

    1982-01-01

    Discusses the nature and applications of mass-selective laser photoionization. The ionization can be done with a single intense laser pulse lasting a few billionths of a second with no molecular fragmentation. Applications focus on: (1) benzene clusters, excimers, and exciplexes; (2) metal clusters; and (3) triplet formation and decay. (Author/JN)

  4. GAS LASERS FOR STRONG-FIELD APPLICATIONS.

    SciTech Connect

    POGORELSKY,I.V.

    2004-09-15

    Atomic-, molecular- and excimer-gas lasers employ variety of pumping schemes including electric discharge, optical, or chemical reactions and cover a broad spectral range from UV to far-IR. Several types of gas lasers can produce multi-kilojoule pulses and kilowatts of average power. Among them, excimer- and high-pressure molecular lasers have sufficient bandwidth for generating pico- and femtosecond pulses. Projects are underway and prospects are opening up to bring ultrafast gas laser technology to the front lines of advanced accelerator applications.

  5. Laser Science and Limb Salvage.

    PubMed

    Friedman, Steven G

    2011-12-01

    Harnessing light energy in the form of lasers became possible after the discovery of electricity. Scientists found various uses for lasers beginning in the 1960s. Creating large amounts of pulsed UV light with any device, including a laser, remained difficult until excimer lasers were invented in the following decade. The invention of excimer lasers coincided with the advent of balloon angioplasty, leading physicians to speculate about using laser energy to obliterate obstructing arterial lesions. The first report of laser energy to vaporize an atherosclerotic plaque appeared in 1980. The ensuing decades witnessed dramatic refinements of laser fibers, laser energy sources, and catheter delivery systems. The favorable results achieved with excimer laser angioplasty in the early 2000s led to a renewed interest in this technology and to the current widespread use of these devices to treat peripheral as well as coronary artery disease. This paper provides a review of laser energy principles, traces the history of the use of lasers to treat vascular disease, and reviews the current literature pertaining to laser angioplasty and limb salvage.

  6. Laser photochemistry of gallium-containing compounds. [Trimethylgallium

    SciTech Connect

    Baughcum, S.L.; Oldenborg, R.C.

    1986-01-01

    The production of gas-phase gallium atoms in the photolysis of trimethylgallium has been investigated at 193 nm and at other laser wavelengths. Ground state (4 /sup 2/P/sup 0//sub 1/2) and metastable (4 /sup 2/P/sup 0//sub 3/2/) gallium atoms are detected using laser-induced fluorescence techniques. Our results indicate that gallium atoms continue to be produced at long times after the laser pulse. The observed dependence on photolysis laser fluence, trimethylgallium pressure, and buffer gas pressure are consistent with a mechanism in which highly excited gallium methyl radicals undergo unimolecular decomposition to produce gallium atoms. Since this process is observed to happen on the time scale of hundreds of microseconds, these results have important implications for studies of metal deposition and direct laser writing by laser photolysis of organometallic compounds. 31 refs., 5 figs.

  7. Use of the holmium:YAG laser in coronary disease

    NASA Astrophysics Data System (ADS)

    Heuser, Richard R.

    1992-08-01

    The holmium:YAG laser, a new solid-state, infrared laser system, is being used increasingly more often for treating peripheral vascular disease. We discuss the early use of this device in coronary laser angioplasty. The holmium:YAG laser has several advantages over excimer systems and may prove to be an effective adjunctive to coronary balloon angioplasty.

  8. [Essential features of astigmatism and its correction with excimer laser].

    PubMed

    Vlaicu, Valeria

    2012-01-01

    The correction of astigmatism is an essential element for the refractive surgery because the majority of patients have important preoperative cylinder An uncorrected astigmatism decreases visual acuity and can also cause glare, asthenopia, headaches, monocular diplopia. It is important to remark that a complete elimination of astigmatism for the eye is very rarely achieved.

  9. Laser Materials and Laser Spectroscopy - A Satellite Meeting of IQEC '88

    NASA Astrophysics Data System (ADS)

    Wang, Zhijiang; Zhang, Zhiming

    1989-03-01

    The Table of Contents for the book is as follows: * Laser Materials * Laser Site Spectroscopy of Transition Metal Ions in Glass * Spectroscopy of Chromium Doped Tunable Laser Materials * Spectroscopic Properties of Nd3+ Ions in LaMgAl11O19 Crystal * Spectral Study and 2.938 μm Laser Emission of Er3+ in the Y3Al5O12 Crystal * Raman-infrared Spectra and Radiationless Relaxation of Laser Crystal NdAl3(BO3)4 * A Study on HB and FLN in BaFCl0.5Br0.5:Sm2+ at 77K * Pair-pumped Upconversion Solid State Lasers * CW Upconversion Laser Action in Neodymium and Erbium doped Solids * Ultra-high Sensitive Upconversion Fluorescence of YbF3 Doped with Trace Tm3+ and Er3+ * The Growth and Properties of NYAB and EYAB Multifunctional Crystal * Study on Fluorescence and Laser Light of Er3+ in Glass * Growth and Properties of Single Crystal Fibers for Laser Materials * A Study on the Quality of Sapphire, Ruby and Ti3+ Doped Sapphire Grown by Temperature Gradient Technique (TGT) and Czochralski Technique (CZ) * The Measurement of Output Property of Ti3+ Al2O3 Laser Crystal * An Xα Study of the Laser Crystal MgF2 : V2+ * Q-switched NAB Laser * Miniature YAG Lasers * Study of High Efficiency {LiF}:{F}^-_2 Color Center Crystals * Study on the Formation Conditions and Optical Properties of (F2+)H Color Center in NaCl:OH- Crystals * Novel Spectroscopic Properties of {LiF}:{F}^+_3 - {F}_2 Mixed Color Centers Laser Crystals * Terraced Substrate Visible GaAlAs Semiconductor Lasers with a Large Optical Cavity * The Temperature Dependence of Gain Spectra, Threshold Current and Auger Recombination in InGaAsP-InP Double Heterojunction Laser diode * Time-resolved Photoluminescence and Energy Transfer of Bound Excitons in GaP:N Crystals * Optical Limiting with Semiconductors * A Critical Review of High-efficiency Crystals for Tunable Lasers * Parametric Scattering in β - BaB2O4 Crystal Induced by Picosecond Pulses * Generation of Picosecond Pulses at 193 nm by Frequency Mixing in β - BaB2O4

  10. Lasers.

    ERIC Educational Resources Information Center

    Schewe, Phillip F.

    1981-01-01

    Examines the nature of laser light. Topics include: (1) production and characteristics of laser light; (2) nine types of lasers; (3) five laser techniques including holography; (4) laser spectroscopy; and (5) laser fusion and other applications. (SK)

  11. Laser Angioplasty

    NASA Technical Reports Server (NTRS)

    1990-01-01

    The principal method of dealing with coronary artery blockage is bypass surgery. A non-surgical alternative available to some patients is balloon angioplasty. For several years, medical researchers have been exploring another alternative that would help a wider circle of patients than the balloon treatment and entail less risk than bypass surgery. A research group is on the verge of an exciting development: laser angioplasty with a 'cool' type of laser, called an excimer laser, that does not damage blood vessel walls and offers non-surgical cleansing of clogged arteries with extraordinary precision. The system is the Dymer 200+ Excimer Laser Angioplasty System, developed by Advanced Intraventional Systems. Used in human clinical tests since 1987, the system is the first fully integrated 'cool' laser capable of generating the requisite laser energy and delivering the energy to target arteries. Thirteen research hospitals in the U.S. have purchased Dymer 200+ systems and used them in clinical trials in 121 peripheral and 555 coronary artery cases. The success rate in opening blocked coronary arteries is 85 percent, with fewer complications than in balloon angioplasty. Food and Drug Administration approval for the system is hoped for in the latter part of 1990. * Advanced Intraventional Systems became Spectranetics in 1994 and discontinued the product.

  12. HCl yield and chemical kinetics study of the reaction of Cl atoms with CH3I at the 298K temperature using the infra-red tunable diode laser absorption spectroscopy.

    PubMed

    Sharma, R C; Blitz, M; Wada, R; Seakins, P W

    2014-07-15

    Pulsed ArF excimer laser (193 nm)-CW infrared (IR) tunable diode laser Herriott type absorption spectroscopic technique has been made for the detection of product hydrochloric acid HCl. Absorption spectroscopic technique is used in the reaction chlorine atoms with methyl iodide (Cl+CH3I) to the study of kinetics on reaction Cl+CH3I and the yield of (HCl). The reaction of Cl+CH3I has been studied with the support of the reaction Cl+C4H10 (100% HCl) at temperature 298 K. In the reaction Cl+CH3I, the total pressure of He between 20 and 125 Torr at the constant concentration of [CH3I] 7.0×10(14) molecule cm(-3). In the present work, we estimated adduct formation is very important in the reaction Cl+CH3I and reversible processes as well and CH3I molecule photo-dissociated in the methyl [CH3] radical. The secondary chemistry has been studied as CH3+CH3ICl = product, and CH3I+CH3ICl = product2. The system has been modeled theoretically for secondary chemistry in the present work. The calculated and experimentally HCl yield nearly 65% at the concentration 1.00×10(14) molecule cm(-3) of [CH3I] and 24% at the concentration 4.0×10(15) molecule cm(-3) of [CH3I], at constant concentration 4.85×10(12) molecule cm(-3) of [CH3], and at 7.3×10(12) molecule cm(-3) of [Cl]. The pressure dependent also studied product of HCl at the constant [CH3], [Cl] and [CH3I]. The experimental results are also very good matching with the modelling work at the reaction CH3+CH3ICl = product (k = (2.75±0.35)×10(-10) s(-1)) and CH3I+CH3ICl = product2 (k = 1.90±0.15)×10(-12) s(-1). The rate coefficients of the reaction CH3+CH3ICl and CH3I+CH3ICl has been made in the present work. The experimental results has been studied by two method (1) phase locked and (2) burst mode.

  13. Cell proliferation on UV-excimer lamp modified and grafted polytetrafluoroethylene

    NASA Astrophysics Data System (ADS)

    Švorčík, V.; Ročková, K.; Ratajová, E.; Heitz, J.; Huber, N.; Bäuerle, D.; Bačáková, L.; Dvořánková, B.; Hnatowicz, V.

    2004-04-01

    Polytetrafluoroethylene (PTFE) was modified by irradiation with 172 nm light from an UV-excimer lamp in reactive ammonia atmosphere. Then, the samples were exposed to aqueous solutions of amino acids (glycine, alanine and leucine). The samples were characterized by water contact angle measurement, UV-VIS spectroscopy and laser-induced fluorescence (LIF). The results indicate, that the amino acids are bound onto the polymer chain. The amount of incorporated amino acid is a decreasing function of its molecular size. By in vitro experiments it was shown that the incorporated amino acids support adhesion and proliferation of rat aortic smooth muscle cells and mouse embryonic 3T3 fibroblasts on the polymer surface. The maximum effect was observed for smallest molecule of glycine.

  14. Tissue morphologic analysis and ablation rates in the UV and visible for laser angioplasty

    NASA Astrophysics Data System (ADS)

    Sartori, M.; Henry, P. D.; Roberts, R.; Sauerbrey, R.; Tittel, F. K.

    1986-08-01

    Ablation rates were determined in human and canine aortas subjected to excimer and visible laser radiation. For UV and pulsed frequency doubled Nd:YAG lasers ablation rates were constant and depended linearly on average laser power, while for cw argon lasers ablation rates depended nonlinearly on laser power.

  15. Lasers '83. Proceedings of the international conference

    SciTech Connect

    Powell, R.C.

    1985-01-01

    Among the topics discussed are the development history of the semiconductor diode laser, laser material processing, nonlinear spectroscopy, recent advancements in diode lasers, laser-driven particle accelerators, laser applications in the atmospheric sciences, laser-assisted collisions, novel (garnet and alexandrite) solid state laser materials, IR molecular lasers, devices and components for fiber-optic communications, free-electron lasers and masers, and picosecond optical phenomena. Also covered are laser-stimulated materials surface processes, color center laser developments, blue-green and metal vapor lasers, laser chemistry, nonlinear effects, high energy lasers, excimer lasers, laser trapping of ions, optical cavities and propagation, laser isotope separation, laser trapping of atoms, laser applications in biochemistry, tunable coherent short wavelength radiation, laser spectroscopy, picosecond studies of condensed phase molecular systems, and combustion and plasma diagnostics.

  16. Variable laser attenuator

    DOEpatents

    Foltyn, Stephen R.

    1988-01-01

    The disclosure relates to low loss, high power variable attenuators comprng one or more transmissive and/or reflective multilayer dielectric filters. The attenuator is particularly suitable to use with unpolarized lasers such as excimer lasers. Beam attenuation is a function of beam polarization and the angle of incidence between the beam and the filter and is controlled by adjusting the angle of incidence the beam makes to the filter or filters. Filters are selected in accordance with beam wavelength.

  17. Variable laser attenuator

    DOEpatents

    Foltyn, S.R.

    1987-05-29

    The disclosure relates to low loss, high power variable attenuators comprising one or more transmissive and/or reflective multilayer dielectric filters. The attenuator is particularly suitable to use with unpolarized lasers such as excimer lasers. Beam attenuation is a function of beam polarization and the angle of incidence between the beam and the filter and is controlled by adjusting the angle of incidence the beam makes to the filter or filters. Filters are selected in accordance with beam wavelength. 9 figs.

  18. Interfacial and Thin Film Chemistry in Electron Device Fabrication

    DTIC Science & Technology

    1990-09-01

    from Semiconductor Surfaces," Appl. Phys. Lett. 56, 1011 (1990). J. Z. Chou . S. A. Hewitt, J. F. Hershberger, B. B. Brady, G. B Spector, L Chia, and...Collisions with High Energy Electrons from 193 nm Excimer Laser Photolysis of Iodine," J. Chem. Phys. 92, 6974 (1990) James Z. Chou and George W. Flynn...GRADUATE RESEARCH ASSISTANTS Rob Beresford (ONR Fellow) Robert Ade Justin Darrow (ONR Fellow) Bob Burke Cynthia Jenks (ONR Fellow) Dan-Li Chen Tom

  19. Laser nitriding and laser carburizing of surfaces

    NASA Astrophysics Data System (ADS)

    Schaaf, Peter

    2003-11-01

    Laser irradiation of surfaces with short pulses in reactive atmospheres (nitrogen, methane) can lead to very effective nitrification and carburization via complicated laser-surface-gas-plasma-interactions. This laser nitriding and laser carburizing and their basic underlying phenomena will be presented and partly explained by results of example materials (iron, titanium, aluminum, silicon) where nitride and carbide coatings can be formed by fast and easily by Excimer Laser, Nd:YAG laser, Free Electron Laser and also by femtosecond Ti:sapphire laser. This implies laser pulse durations from the nanosecond to the femtosecond regime and wavelengths from ultra-violet to infrared. The resulting surfaces, thin films, coatings and their properties are investigated by combining Mossbauer Spectroscopy, x-ray diffraction, x-ray absorption spectroscopy, Nanoindentation, Resonant Nuclear Reaction Analysis, and Rutherford Backscattering Spectroscopy.

  20. Single photon ionization (SPI) via incoherent VUV-excimer light: robust and compact time-of-flight mass spectrometer for on-line, real-time process gas analysis.

    PubMed

    Mühlberger, F; Wieser, J; Ulrich, A; Zimmermann, R

    2002-08-01

    Fast on-line detection of organic compounds from complex mixtures, such as industrial process gas streams, require selective and sensitive analytical methods. One feasible approach for this purpose is the use of mass spectrometry (MS) with a selective and soft (fragment-free) ionization technique, such as chemical ionization (CI) or photo ionization (PI). Single photon ionization (SPI) with vacuum ultraviolet (VUV) light is a particularly sof tionization technique, well-suited for detection of both aromatic and aliphatic species. Problematic, however, is the generation of the VUV light. In general, the vacuum ultraviolet (VUV) light sources for SPI-MS are based either on lasers (e.g., 118-nm radiation generated by frequency-tripling of the third harmonic of a Nd:YAG laser) or on conventional VUV lamps, such as deuterium lamps. Althoughthe laser-based techniques are very sophisticated and expensive, the conventional lamps have serious drawbacks regarding their optical parameters, such as low-output power, low spectral power density, and broad emission bands. In this work, a novel excimer VUV light source, in which an electron beam is used to form rare gas excimer species, is used. The excimer VUV light sourceproduces brilliant and intense VUV light. The novel VUV light source was coupled to a compact and mobile time-of-flight mass spectrometer (TOFMS). A special interface design, including optical (VUV optics) as well as electronic measures (e.g., pulsed ion extraction) was realized. The use of the excimer VUV lamp for SPI will allow the realization of very compact, rugged, and sensitive SPI-TOFMS devices, which preferably will be adapted for process analytical application or monitoring issues (e.g., chemical warfare detection). The excimer VUV-lamp technology delivers VUV light with a good beam quality and high-output power at low costs. Furthermore, it allows changing the emitted wavelength as well as the bandwidth of the excimer VUV lamp in t he 100-200-nm region

  1. Properties of zirconia thin films deposited by laser ablation

    SciTech Connect

    Cancea, V. N.; Filipescu, M.; Colceag, D.; Dinescu, M.; Mustaciosu, C.

    2013-11-13

    Zirconia thin films have been deposited by laser ablation of a ceramic ZrO{sub 2} target in vacuum or in oxygen background at 0.01 mbar. The laser beam generated by an ArF laser (λ=193 nm, ν=40 Hz) has been focalized on the target through a spherical lens at an incident angle of 45°. The laser fluence has been established to a value from 2.0 to 3.4 Jcm{sup −2}. A silicon (100) substrate has been placed parallel to the target, at a distance of 4 cm, and subsequently has been heated to temperatures ranging between 300 °C and 600 °C. Thin films morphology has been characterized by atomic force microscopy and secondary ion mass spectrometry. Biocompatibility of these thin films has been assessed by studying the cell attachment of L929 mouse fibroblasts.

  2. Laser Raster Conditioning of KDP and KDKP Crystals Using XeCl and ND:YAG Lasers

    SciTech Connect

    Staggs, M; Yan, M; Runkel, M

    2000-12-20

    Laser conditioning by raster scanning KDP and DKDP crystals using Nd:YAG and XeCl excimer laser systems was demonstrated. The laser systems were evaluated to determine their respective feasibility of improving the damage thresholds of the harmonic materials for use on the National Ignition Facility (NIF). Crystals were first evaluated using an Nd:YAG laser (355 nm, 7.6 ns) by scanning 2 x 2 cm2 areas with sub-damage threshold fluences and then performing unconditioned (SA) damage tests at 355-nm in the respectively scanned regions. Subsequently, five KDP and DKDP samples of various damage quality were raster scanned in a similar fashion at MicroLas GmbH (Goettingen, Germany) using a commercial Lambda Physik Excimer system (XeCl, {lambda} = 308 nm, 20 ns). The samples treated in Germany were then tested at Livermore National Laboratory (LLNL) at 355 nm to demonstrate the excimer's potentia1 as an alternative conditioning source. The excimer scan results suggest that crystals can be treated at high fluence (50 Ycm2, 308-nm, 204s) levels without noticeable bulk damage. In addition, comparable conditioning is possible even with the fluence set at 30% of the 308-nm damage threshold. The laser damage tests with 355-nrn on the majority of the excimer laser-treated crystals demonstrates the effect of conditioning, by raising the SI1 threshold or by reducing the low fluence tail of the 355-nm S/1 damage probability curves. Furthermore, the high average power and flat top beam profile of an excimer laser makes it possible to laser condition a 42-crn NIF-size crystal in one day, compared to 41 days for a commercial table-top Nd:YAG system. The test samples were to be particularly susceptible to surface damage during excimer raster conditioning, possibly due to high levels of dust and/or contaminants in the laboratory environment.

  3. SITE - EMERGING TECHNOLOGIES: LASER INDUCED PHOTO- CHEMICAL OXIDATIVE DESTRUCTION OF TOXIC ORGANICS IN LEACHATES AND GROUNDWATERS

    EPA Science Inventory

    The technology described in this report has been developed under the Emerging Technology Program of the Superfund Innovative Technology Evaluation (SITE) Program to photochemically oxidize organic compounds in wastewater by applying ultraviolet radiation using an excimer laser. T...

  4. Tunable, rare earth-doped solid state lasers

    DOEpatents

    Emmett, John L.; Jacobs, Ralph R.; Krupke, William F.; Weber, Marvin J.

    1980-01-01

    Laser apparatus comprising combinations of an excimer pump laser and a rare earth-doped solid matrix, utilizing the 5d-4f radiative transition in a rare earth ion to produce visible and ultra-violet laser radiation with high overall efficiency in selected cases and relatively long radiative lifetimes.

  5. Excimer emission from pulsed microhollow cathode discharges in xenon

    SciTech Connect

    Lee, B.-J.; Nam, S. H.; Rahaman, H.; Iberler, M.; Jacoby, J.; Frank, K.

    2013-12-15

    Direct current (dc) microhollow cathode discharge (MHCD) is an intense source for excimer radiation in vacuum ultraviolet at a wavelength of 172 nm in a high pressure xenon (Xe) gas. The concentration of precursors for the excimer formation, i.e., excited and ionized gas atoms, increases significantly by applying high voltage pulse onto the dc MHCD over the pulse duration range from 20 to 100 ns. The intensity of the excimer emission for the voltage pulse of 20 ns duration exceeds that of the emission intensity obtained from the same MHCD operated only in the dc mode, by one order of magnitude. In addition, the emission intensity increases by one order of magnitude over the pulse duration range from 20 to 100 ns. It can be assumed that the emission intensity of the MHCD source increases as long as the duration of the high voltage pulse is shorter than the electron relaxation time. For the high voltage pulse of 100 ns duration, the emission intensity has been found to be further enhanced by a factor of three when the gas pressure is increased from 200 to 800 mbar.

  6. Lasers '86; Proceedings of the Ninth International Conference on Lasers and Applications, Orlando, FL, Nov. 3-7, 1986

    SciTech Connect

    Mcmillan, R.W.

    1987-01-01

    Laser physics, technology, and applications are examined in reviews and reports. Topics addressed include VUV and X-ray lasers, vibrational energy transfer and kinetics, medical applications, ultrashort lasers and spectroscopy, surface and material interactions, lasers in atmospheric physics, and fiber-optic systems. Consideration is given to alexandrite lasers, four-wave mixing and nonlinear optics, chemical lasers, semiconductor lasers, photothermal and photoacoustic spectroscopy, dye lasers, optical phase conjugation and SBS, excimer lasers, SDI laser applications, remote-sensing with lasers, FELs, and applications in chemistry. Diagrams, drawings, graphs, and photographs are provided.

  7. Contrasting the beam interaction characteristics of selected lasers with a partially stabilized zirconia bio-ceramic

    NASA Astrophysics Data System (ADS)

    Lawrence, J.

    2002-08-01

    Differences in the beam interaction characteristics of a CO2 laser, a Nd : YAG laser, a high power diode laser (HPDL) and an excimer laser with a partially stabilized zirconia bio-ceramic have been studied. A derivative of Beer-Lambert's law was applied and the laser beam absorption lengths of the four lasers were calculated as 33.55×10-3 cm for the CO2 laser, 18.22×10-3 cm for the Nd : YAG laser, 17.17×10-3 cm for the HPDL and 8.41×10-6 cm for the excimer laser. It was determined graphically that the fluence threshold values at which significant material removal was effected by the CO2 laser, the Nd : YAG laser, the HPDL and the excimer laser were 52 J cm-2, 97 J cm-2, 115 J cm-2 and 0.48 J cm-2, respectively. The thermal loading value for the CO2 laser, the Nd : YAG laser, the HPDL and the excimer laser were calculated as being 1.55 kJ cm-3, 5.32 kJ cm3, 6.69 kJ cm-3 and 57.04 kJ cm-3, respectively.

  8. 10 CFR Appendix F to Part 110 - Illustrative List of Laser-Based Enrichment Plant Equipment and Components Under NRC Export...

    Code of Federal Regulations, 2010 CFR

    2010-01-01

    ... laser. The laser system for MLIS usually consists of a CO2 or excimer laser and a multi-pass optical... 10 Energy 2 2010-01-01 2010-01-01 false Illustrative List of Laser-Based Enrichment Plant... Appendix F to Part 110—Illustrative List of Laser-Based Enrichment Plant Equipment and Components Under...

  9. Development of convenient nitrogen laser by using control of discharge

    NASA Astrophysics Data System (ADS)

    Nakazawa, Seiichi; Yamaguchi, Eiichiro; Ishii, Yoshio

    2012-01-01

    Among the most important UV lasers are the excimer and the nitrogen. A nitrogen gas laser is widely used in various fields. We considered some ideas for a nitrogen laser built in more easily by using of triboluminescence. In this study, we discussed development and discussion of convenient nitrogen laser. We considered utilization of triboluminescence for control of discharge and the system of electric generator using triboluminescence in the longitudinally excited nitrogen laser.

  10. Xenon excimer emission from multicapillary discharges in direct current mode

    SciTech Connect

    Lee, Byung-Joon; Rahaman, Hasibur; Nam, Sang Hoon; Giapis, Konstantinos P.; Iberler, Marcus; Jacoby, Joachim; Frank, Klaus

    2011-08-15

    Microdischarges in xenon have been generated in a pressure range of 400-1013 mbar with a fixed flow rate of 100 sccm. These microdischarges are obtained from three metallic capillary tubes in series for excimer emission. Total discharge voltage is thrice as large as that of a single capillary discharge tube at current levels of up to 12 mA. Total spectral irradiance of vacuum ultraviolet (VUV) emission also increases significantly compared to that of the single capillary discharge. Further, the irradiance of the VUV emission is strongly dependent on pressure as well as the discharge current.

  11. Laser assisted processing; Proceedings of the Meeting, Hamburg, Federal Republic of Germany, Sept. 19, 20, 1988

    NASA Astrophysics Data System (ADS)

    Laude, Lucien D.; Rauscher, Gerhard

    The use of lasers in industrial material processing is discussed in reviews and reports. Sections are devoted to high-precision laser machining, deposition methods, ablation and polymers, and synthesis and oxidation. Particular attention is given to laser cutting of steel sheets, laser micromachining of material surfaces, process control in laser soldering, laser-induced CVD of doped Si stripes on SOS and their characterization by piezoresistivity measurements, laser CVD of Pt spots on glass, laser deposition of GaAs, UV-laser photoablation of polymers, ArF excimer-laser ablation of HgCdTe semiconductor, pulsed laser synthesis of Ti silicides and nitrides, the kinetics of laser-assisted oxidation of metallic films, and excimer-laser-assisted etching of solids for microelectronics.

  12. Laser research and development in the Northeast; Proceedings of the Meeting, Cambridge, MA, Sept. 16, 17, 1986

    SciTech Connect

    Trainor, D.W.; Chicklis, E.P.

    1987-01-01

    The development and scaling of excimer lasers with emphasis on both electron-beam and discharge pumpings; a chemical means of generating laser action in the visible region; the use of stimulated Raman techniques to improve the beam quality output of systems employing excimer lasers; the research and development of CO/sub 2/ lasers; a CO/sub 2/ laser amplifier for radar applications; medical laser usage; and laser monitors for trace species in environmental and industrial processes are examined. Consideration is given to high power laser research and development for laser energetics; linear and nonlinear frequency converters; 450 nm laser operation in Tm(3+):YLF; alexandrite lasers and their applications; and the performance limitations of vibronic lasers. Topics discussed include the laser ignition of oil spills; the application of laser rangers to submunitions; the design and application of laser intensity stabilizers; and a 535 nm active atomic line filter that uses the Tl metastable state as an absorbing medium.

  13. Large-Area Laser-Lift-Off Processing in Microelectronics

    NASA Astrophysics Data System (ADS)

    Delmdahl, R.; Pätzel, R.; Brune, J.

    Laser lift-off is an enabling technology for microelectronics growth markets such as light emitting diodes, densely packaged semiconductor devices, and flexible displays. For example, thin film transistor structures fabricated on top of polymer layers spun on glass carriers must be delaminated from rigid substrates to create lightweight and rugged flexible displays on polymers. Low-thermal-budget processes are generically required to protect adjacent functional films. Excimer lasers provide short UV wavelength and short pulse duration required for highly-localized energy coupling. The high output power of excimer lasers enables a large processing footprint and the high-throughput rates needed in mass manufacturing.

  14. APPLICATIONS OF LASERS AND OTHER TOPICS IN QUANTUM ELECTRONICS: Laser system based on a commercial microwave oscillator with time compression of a microwave pump pulse

    NASA Astrophysics Data System (ADS)

    Arteev, M. S.; Vaulin, V. A.; Slinko, V. N.; Chumerin, P. Yu; Yushkov, Yu G.

    1992-06-01

    An analysis is made of the possibility of using a commercial microsecond microwave oscillator, supplemented by a device for time compression of microwave pulses, in pumping of industrial lasers with a high efficiency of conversion of the pump source energy into laser radiation. The results are reported of preliminary experiments on the commissioning of an excimer XeCl laser.

  15. The photodissociation of oxetane at 193 nm as the reverse of the Paterno-Buchi reaction

    SciTech Connect

    Lee, Shih-Huang

    2009-12-14

    We investigated the photodissociation of oxetane (1,3-trimethylene oxide) at 193.3 nm in a molecular-beam apparatus using photofragment-translational spectroscopy and selective photoionization. We measured time-of-flight (TOF) spectra and angular anisotropy parameters {beta}(t) as a function of flight time of products at m/z=26-30 u utilizing photoionization energies from 9.8 to 14.8 eV. The TOF distributions of the products alter greatly with the employed photon energy, whereas their {beta}(t) distributions are insensitive to the photon energy. Dissociation to H{sub 2}CO+C{sub 2}H{sub 4} is the major channel in the title reaction. Three distinct dissociation paths with branching ratios 0.923:0.058:0.019 are responsible for the three features observed in the distribution of kinetic energy released in the channel H{sub 2}CO+C{sub 2}H{sub 4}. The observation of H{sub 2} and H atoms, {approx}1% in branching, indicates that products H{sub 2}CO and C{sub 2}H{sub 4} spontaneously decompose to only a small extent. Most HCO, C{sub 2}H{sub 3}, and C{sub 2}H{sub 2} ions originate from dissociative photoionization of products H{sub 2}CO and C{sub 2}H{sub 4}. Except atomic H and H{sub 2}, the photoproducts have large angular anisotropies, {beta}{>=}-0.8, which reflects rapid dissociation of oxetane following optical excitation at 193.3 nm. The mechanisms of dissociation of oxetane are addressed. Our results confirm the quantum-chemical calculations of Palmer et al. and provide profound insight into the Paterno-Buchi reaction.

  16. The photodissociation of oxetane at 193 nm as the reverse of the Paterno-Buchi reaction.

    PubMed

    Lee, Shih-Huang

    2009-12-14

    We investigated the photodissociation of oxetane (1,3-trimethylene oxide) at 193.3 nm in a molecular-beam apparatus using photofragment-translational spectroscopy and selective photoionization. We measured time-of-flight (TOF) spectra and angular anisotropy parameters beta(t) as a function of flight time of products at m/z=26-30 u utilizing photoionization energies from 9.8 to 14.8 eV. The TOF distributions of the products alter greatly with the employed photon energy, whereas their beta(t) distributions are insensitive to the photon energy. Dissociation to H(2)CO+C(2)H(4) is the major channel in the title reaction. Three distinct dissociation paths with branching ratios 0.923:0.058:0.019 are responsible for the three features observed in the distribution of kinetic energy released in the channel H(2)CO+C(2)H(4). The observation of H(2) and H atoms, approximately 1% in branching, indicates that products H(2)CO and C(2)H(4) spontaneously decompose to only a small extent. Most HCO, C(2)H(3), and C(2)H(2) ions originate from dissociative photoionization of products H(2)CO and C(2)H(4). Except atomic H and H(2), the photoproducts have large angular anisotropies, beta>or=-0.8, which reflects rapid dissociation of oxetane following optical excitation at 193.3 nm. The mechanisms of dissociation of oxetane are addressed. Our results confirm the quantum-chemical calculations of Palmer et al. and provide profound insight into the Paterno-Buchi reaction.

  17. The photodissociation of oxetane at 193 nm as the reverse of the Paterno-Buchi reaction

    NASA Astrophysics Data System (ADS)

    Lee, Shih-Huang

    2009-12-01

    We investigated the photodissociation of oxetane (1,3-trimethylene oxide) at 193.3 nm in a molecular-beam apparatus using photofragment-translational spectroscopy and selective photoionization. We measured time-of-flight (TOF) spectra and angular anisotropy parameters β(t) as a function of flight time of products at m /z=26-30 u utilizing photoionization energies from 9.8 to 14.8 eV. The TOF distributions of the products alter greatly with the employed photon energy, whereas their β(t) distributions are insensitive to the photon energy. Dissociation to H2CO+C2H4 is the major channel in the title reaction. Three distinct dissociation paths with branching ratios 0.923:0.058:0.019 are responsible for the three features observed in the distribution of kinetic energy released in the channel H2CO+C2H4. The observation of H2 and H atoms, ˜1% in branching, indicates that products H2CO and C2H4 spontaneously decompose to only a small extent. Most HCO, C2H3, and C2H2 ions originate from dissociative photoionization of products H2CO and C2H4. Except atomic H and H2, the photoproducts have large angular anisotropies, β ≥-0.8, which reflects rapid dissociation of oxetane following optical excitation at 193.3 nm. The mechanisms of dissociation of oxetane are addressed. Our results confirm the quantum-chemical calculations of Palmer et al. and provide profound insight into the Paterno-Buchi reaction.

  18. A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory

    NASA Astrophysics Data System (ADS)

    Zhao, Yang; Gong, Yan; Li, Shun; Zhang, Wei

    2010-08-01

    Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However, the former has the disadvantage of weak intensity distribution controlling ability, and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized, and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE, light beam propagation distance, and the structure of the beam shaping unit, a method of determining the designing parameters is discussed. Using this method, several illumination modes are realized, and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last, and it is proven to be feasible.

  19. Simple method for measuring acid generation quantum efficiency at 193 nm

    NASA Astrophysics Data System (ADS)

    Szmanda, Charles R.; Kavanagh, Robert J.; Bohland, John F.; Cameron, James F.; Trefonas, Peter, III; Blacksmith, Robert F.

    1999-06-01

    Traditional methods of measuring the Dill C Parameter involve monitoring the absorbance of a resist as a function of exposure. In chemically amplified resist, absorbance changes with exposure are small and frequently have little correlation to the amount of photoacid generated.

  20. The art of photomask materials for low-k1-193nm lithography

    NASA Astrophysics Data System (ADS)

    Hashimoto, Masahiro; Iwashita, Hiroyuki; Mitsui, Hideaki

    2009-04-01

    The resolution of photomask patterns were improved with a hardmask (HM) system. The system which is thin Sicompounds layer is easily etched by the hyper-thin resist (below 100nm thickness). The HM material has sufficient etching selectivity against the chrome-compounds which is the second layer chrome absorber for the phase-shifter. This hardmask layer has been completely removed during the phase-shifter etching. It means that the conventional phase-shit mask (PSM) has been made with the ultimately high-resolution without configuration changes. Below 50nm resolution of PSM was made with 90nm thickness resist on HM layer in this paper. The CD bias between a resist feature CD and a chrome feature CD was almost zero (below 1nm) in the optimized etching condition. We confirmed that the mask performances were the equal to COMS (Cr-HM on MoSi binary mask) in resolution and CD linearity. The performances of hardmask blanks will be defined by resist performance because of almost zero bias.

  1. Impact of water and top-coats on lithographic performance in 193-nm immersion lithography

    NASA Astrophysics Data System (ADS)

    Kishimura, Shinji; Gronheid, Roel; Ercken, Monique; Maenhoudt, Mireille; Matsuo, Takahiro; Endo, Masayuki; Sasago, Masaru

    2005-05-01

    We have investigated the impact of water and top-coats on the resist in water immersion lithography by analyzing the dissolution behavior and the film constitution. We used a resist development analyzer (RDA) and a quartz crystal microbalance (QCM) to study the dissolution behavior. The film constitution was studied through the gradient shaving preparation (GSP) method in combination with TOF-SIMS. The GSP/TOF-SIMS method reveals the constitution of a top-coat/resist film. We found that, in a resist, the photo acid generator (PAG) anion at a depth of about 30 nm from the surface leached into water and a surface insoluble layer formed during immersion. The estimated amount of leaching was about 5% of the original content. The formation of an intermixing layer with a low dissolution rate was observed for some top-coat and resist combinations. The thickness of the intermixing layer and the formation behavior were made clear. We believe the intermixing layer was caused by the top-coat solvent eluting resist components. In a top-coat, a PAG existed within the top-coat and the PAG anion leached into the water. Top-coats blocked gaseous decomposed products from the resist film during PEB. These results are useful for estimating patterning characteristics and the defectivity due to materials for actual immersion exposure.

  2. Cross Sections for Ionization of Rare Gas Excimers by Electron Impact and Atomic and Molecular Processes in Excimer Lasers.

    DTIC Science & Technology

    1980-03-01

    technical report has been reviewed and is approved for publication. ALAN GARSCADDEN ROBERT R. BARTHELEMY Project Engineer Chief, Energy Conversion...of Technology. The Air Force Monitor was Dr. Alan Garscadden . The research for this work was performed during the period April 1978 through September

  3. Applications of lasers and electro-optics

    NASA Astrophysics Data System (ADS)

    Tan, B. C.; Low, K. S.; Chen, Y. H.; Ahmad, Harith; Tou, T. Y.

    Supported by the IRPA Programme on Laser Technology and Applications, many types of lasers have been designed, constructed and applied in various areas of science, medicine and industries. Amongst these lasers constructed were high power carbon dioxide lasers, rare gas halide excimer lasers, solid state Neodymium-YAG lasers, nitrogen lasers, flashlamp pumped dye lasers and nitrogen and excimer laser pumped dye lasers. These lasers and the associated electro-optics system, some with computer controlled, are designed and developed for the following areas of applications: (1) industrial applications of high power carbon dioxide lasers for making of i.c. components and other materials processing purposes -- prototype operational systems have been developed; (2) Medical applications of lasers for cancer treatment using the technique of photodynamic therapy -- a new and more effective treatment protocol has been proposed; (3) agricultural applications of lasers in palm oil and palm fruit-fluorescence diagnostic studies -- fruit ripeness signature has been developed and palm oil oxidation level were investigated; (4) development of atmospheric pollution monitoring systems using laser lidar techniques -- laboratory scale systems were developed; and (5) other applications of lasers including laser holographic and interferometric methods for the non destructive testing of materials.

  4. Laser sources for Raman spectroscopy

    NASA Astrophysics Data System (ADS)

    Kilmer, J.; Iadevaia, A.; Yin, Y.

    2011-06-01

    While conventional Raman Spectroscopy (RS) has predominately used fixed wavelength cw lasers, advanced Raman spectroscopic techniques such as Stimulated Raman and some types of Raman Imaging typically need pulsed lasers with sufficient energy to induce the Raman process. In addition, pulsed lasers are beneficial for the following Raman techniques: Time Resolved Raman (TRR), Resonance Raman (RR), or non linear Raman techniques, such as Coherent anti-Stokes Raman spectroscopy (CARS). Here the naturally narrower linewidth of a ns pulse width laser is advantageous to a broader linewidth ultrafast pulsed laser. In this paper, we report on the development of a compact, highly efficient, high power solid-state Ti: Sapphire laser ideally suited for many Raman spectroscopic techniques. This laser produces nanosecond pulses at kHz repetition rates with a tunable output wavelength from ~1 micron to ~200 nm and pulse energies up to 1 mJ. The narrow bandwidth of this laser (<0.1cm-1) is ideally suited for applications such as Laser-induced fluorescence (LIF) measurement of OH free-radicals concentrations, atmospheric LIDAR and Raman spectroscopy. New KBBF and RBBF deep ultraviolet (DUV) and vacuum ultraviolet (VUV) crystals are now available that enable direct doubling of the SHG output of these tunable Ti: Sapphire lasers to directly achieve wavelengths as short as 175 nm without the need to generate the 3rd harmonic and utilize frequency mixing. This results in a highly efficient output in the DUV/VUV, enabling improved signal to noise ratios (S/N) in these previously difficult wavelength regions. Photonics Industries has recently achieved a few mW of power at 193nm with such direct doubling crystals.

  5. Time-resolved imaging of cavitation effects during laser lithotripsy

    NASA Astrophysics Data System (ADS)

    Siano, Salvatore; Pini, Roberto; Salimbeni, Renzo; Vannini, Matteo

    1995-01-01

    We devised a diagnostic technique based on a pump-and-probe scheme that provided time- resolved imaging of photofragmentation effects during laser lithotripsy. The evolution of the cavitation bubble induced on kidney stone samples by underwater irradiation with a XeCl excimer laser is presented and analyzed.

  6. KrF laser-induced ablation and patterning of Y--Ba--Cu--O films

    SciTech Connect

    Heitz, J.; Wang, X.Z.; Schwab, P.; Baeuerle, D. ); Schultz, L. )

    1990-09-01

    The ablation and patterning of Y--Ba--Cu--O films on (100) SrTiO{sub 3} and (100) MgO substrates by KrF excimer-laser light projection was investigated. Three different regimes of laser-material interactions were observed. Transition temperatures and critical current densities in laser-fabricated strip lines were investigated.

  7. Far-ultraviolet laser ablation of the cornea: photoacoustic studies

    SciTech Connect

    Srinivasan, R.; Dyer, P.E.; Braren, B.

    1987-01-01

    Wide bandwidth piezoelectric transducers made of thin (9 microns) polyvinylidene fluoride film have been used to make time-resolved measurements of the stress-wave generated by far-ultraviolet (193 nm) laser ablation in corneal tissue in vitro. At high fluence (approximately 250 mJ/cm2), ablation commences within 10 ns (+/- 5 ns) of the laser pulse and generates short acoustic impulses (approximately 30 ns). The time profile of the ablation, when coupled to the energy requirements for ablation from earlier work, allows the estimation of a temperature and a half-life for the thermal decomposition of the collagen in cornea. These values do not support a photothermal mechanism for the ablation under the experimental conditions.

  8. Lasers '85; Proceedings of the Eighth International Conference, Las Vegas, NV, Dec. 2-6, 1985

    NASA Astrophysics Data System (ADS)

    Wang, Charles P.

    The present conference on laser technology development encompasses issues in such areas as VUV and X-ray lasers; optical phase conjugation and nonlinear optics; laser applications in medicine; methods for optical processing; laser and nonlinear spectroscopy; ultrashort-pulse lasers and their applications; frequency selection in pulsed lasers; and interactions between laser beams, material surfaces, and material volumes. Also treated are laser applications in the Strategic Defense Initiative program, chemical laser design and performance, the lasing of biophysical materials, laser diagnostics in fluids and plasma, semiconductor laser diodes and arrays, solid state lasers, radiation- and solar-pumped lasers, laser cavities and propagation, remote sensing with lasers and fiber-optics, coupled resonators and diode lasers, industrial applications of lasers, excimer lasers, optoelectronics, CO2 lasers, fiber-optic sensors, alexandrite lasers, free electron lasers, and IR and visible wavelength lasers.

  9. Lasers '85; Proceedings of the Eighth International Conference, Las Vegas, NV, Dec. 2-6, 1985

    SciTech Connect

    Wang, C.P.

    1986-01-01

    The present conference on laser technology development encompasses issues in such areas as VUV and X-ray lasers; optical phase conjugation and nonlinear optics; laser applications in medicine; methods for optical processing; laser and nonlinear spectroscopy; ultrashort-pulse lasers and their applications; frequency selection in pulsed lasers; and interactions between laser beams, material surfaces, and material volumes. Also treated are laser applications in the Strategic Defense Initiative program, chemical laser design and performance, the lasing of biophysical materials, laser diagnostics in fluids and plasma, semiconductor laser diodes and arrays, solid state lasers, radiation- and solar-pumped lasers, laser cavities and propagation, remote sensing with lasers and fiber-optics, coupled resonators and diode lasers, industrial applications of lasers, excimer lasers, optoelectronics, CO/sub 2/ lasers, fiber-optic sensors, alexandrite lasers, free electron lasers, and IR and visible wavelength lasers.

  10. Advanced Laser Chemical Processing For Microelectronics and Integrated Optics

    DTIC Science & Technology

    1992-08-15

    Barbara, CA (June 25-27, 1990). 15. R.M. Osgood, Jr., " Laser - Fabrication for Integrated Electronics and Optics," OITDA Conference, Tokyo, Japan, (July 5...Society Meeting, Boston, MA, November 26 - December 3, 1990. 20. R.M. Osgood, Jr., "Advances in Laser Fabrication for Solid-State Electronics and...Thin, Excimer Laser-Deposited Cd Interlayers," J. Elec. Mat. 12, 1239 (July, 1990). 14. R.M. Osgood, Jr., " Laser - Fabrication for Solid State

  11. Solid Lubrication of Laser Grown Fluorinated Diamond Thin Films

    DTIC Science & Technology

    1992-01-21

    irradiation of laser beam on the substrate surface 2 Schematic diagram showing laser CVD experimental set- up . 27 A single laser beam (YAG or Excimer) was only...0.05 to 0.2 depending upon temperature, environment, load, speed and presence of foreign material. Todate , ultra-low coefficients of friction (0.02...Laser technology for diamond film fabrication is very new and todate only a handful number of publications are available that address directly on the

  12. Laser Ablation for Medical Applications

    NASA Astrophysics Data System (ADS)

    Hayashi, Ken-Ichi

    Medical applications of laser are measurement, laser surgery, in-situ monitoring, and processing of medical devices. In this paper, author briefly reviews the trends of medical applications, describes some new applications, and then discuss about the future trends and problems of medical applications. At present, the domestic market of laser equipment for medical applications is nearly 1/10 of that for industrial applications, which has registered significant growth continuously. Laser surgery as a minimum invasive surgery under arthroscope is expected to decrease the pain of patients. Precise processing such as cutting and welding is suitable for manufacturing medical devices. Pulsed laser deposition has been successfully applied to the thin film coating. The corneal refractive surgery by ArF excimer laser has been widely accepted for its highly safe operation. Laser ablation for retinal implant in the visual prosthesis is one of the promising applications of laser ablation in medicine. New applications with femtosecond laser are expected in the near future.

  13. Lasers '88; Proceedings of the International Conference, Lake Tahoe, NV, Dec. 4-9, 1988

    NASA Astrophysics Data System (ADS)

    Sze, R. C.; Duarte, F. J.

    Papers are presented on quantum optics and electronics, VUV and X-ray lasers, excimer lasers, free electron lasers, chemical lasers, nuclear-pumped lasers, directed energy technology for strategic defense, discharge lasers, and high power gas lasers. Also covered are CO2 and FIR lasers, ultrafast lasers and techniques, dye lasers, solid state lasers, semiconductor and diode lasers, and nonlinear effects in fibers and fiber lasers. Additional papers are also presented on dynamic gratings and wave mixing; laser radars, lidars, and remote sensing; diode laser applications; adaptive optics and propagation; ultrafast phenomena; laser spectroscopy and lasers in chemistry; laser dyes; and imaging techniques. Finally, papers covering optical devices and measuring instruments, lasers in medicine, lasers in industry, and lasers in education round out the proceedings.

  14. Aggregation-controlled excimer emission from anthracene-containing polyamidoamine dendrimers.

    PubMed

    Lekha, P K; Prasad, Edamana

    2010-03-22

    Lower generations of polyamidoamine (PAMAM) dendrimers were peripherally modified with anthracene moieties, and excimer emission from anthracene chromophores was investigated in an acetonitrile-water mixture at acidic and basic pH values. Results from fluorescence spectroscopic experiments suggest that 1) the propensity of anthracene-modified PAMAM dendrimers to aggregate in acetonitrile is substantial in the presence of 15-20 vol % of water, and 2) aggregate formation in anthracene-modified PAMAM dendrimers leads to unique morphologies in the ground state, where the anthracene units are pre-arranged to form stable excimers upon photoexcitation. Three types of anthracene excimers are generated in the system, with face-to-face, angular, and T-shaped geometry. The formation of different types of anthracene excimers was confirmed by steady-state and time-resolved fluorescence spectroscopic experiments. Experimental results further suggest that it is feasible to alter the type of excimer formed by anthracene units attached to the PAMAM dendrimers through altering the propensity for ground-state aggregation. Most excitingly, increased pi conjugation in the molecular framework of anthracene-substituted PAMAM dendrimers leads to intense and exclusive excimer emission from anthracene at room temperature.

  15. Charge-transfer state excitation as the main mechanism of the photodarkening process in ytterbium-doped aluminosilicate fibres

    SciTech Connect

    Bobkov, K K; Rybaltovsky, A A; Vel'miskin, V V; Likhachev, M E; Bubnov, M M; Dianov, E M; Umnikov, A A; Gur'yanov, A N; Vechkanov, N N; Shestakova, I A

    2014-12-31

    We have studied photodarkening in ytterbium-doped fibre preforms with an aluminosilicate glass core. Analysis of their absorption and luminescence spectra indicates the formation of stable Yb{sup 2+} ions in the glass network under IR laser pumping at a wavelength λ = 915 nm and under UV irradiation with an excimer laser (λ = 193 nm). We have performed comparative studies of the luminescence spectra of the preforms and crystals under excitation at a wavelength of 193 nm. The mechanism behind the formation of Yb{sup 2+} ions and aluminium – oxygen hole centres (Al-OHCs), common to ytterbium-doped YAG crystals and aluminosilicate glass, has been identified: photoinduced Yb{sup 3+} charge-transfer state excitation. (optical fibres)

  16. Réalisation de réseaux sur polymères par laser UV

    NASA Astrophysics Data System (ADS)

    Castex, M. C.; Fischer, A.; Simeonov, D.; Adès, D.; Siove, A.

    2003-06-01

    Nous présentons ici une méthode très simple de réalisation de réseaux d'amplitude de pas sub-micronique sur des films polymères à base de carbazote déposés sur des substrat de silice. Les réseaux sont fabriqués en irradiant avec un faisceau laser à 193nm un masque de phase placé au contact du film. La qualité des réseaux obtenus permet désormais d'envisager la réalisation de micro-cavités lasers de type planaire permettant de sélectionner une émission laser monomode autour de 400nm.

  17. Observation of wavelength-sensitive mass-independent sulfur isotope effects during SO2 photolysis: Implications for the early atmosphere

    NASA Astrophysics Data System (ADS)

    Farquhar, James; Savarino, Joel; Airieau, Sabine; Thiemens, Mark H.

    2001-12-01

    Mass-independent isotopic signatures for δ33S, δ34S, and δ36S produced in the photolysis of sulfur dioxide exhibit a strong wavelength dependence. Photolysis experiments with three light sources (ArF excimer laser (193 nm), mercury resonance lamp (184.9 and 253.7 nm), and KrF excimer laser (248 nm) are presented. Products of sulfur dioxide photolysis undertaken with 193-nm radiation exhibit characteristics that are similar to sulfur multiple-isotope data for terrestrial sedimentary rock samples older than 2450 Ma (reported by Farquhar et al. [2000a]), while photolysis experiments undertaken with radiation at other wavelengths (longer than 220 nm and at 184.9 nm) exhibit different characteristics. The spectral window between 190 and 220 nm falls between the Schumann-Runge bands of oxygen and the Hartley bands of ozone, and its absorption is therefore more sensitive to changes in altitude and atmospheric oxygen content than neighboring wavelengths. These two observations are used to suggest a link between sulfur dioxide photolysis at 193 nm and sulfur isotope anomalies in Archean rocks. This hypothesis includes the suggestion that UV wavelengths shorter than 200 nm penetrated deep in the Earth's atmosphere during the Archean. Potential implications of this hypothesis for the chemistry, composition, and UV absorption of the atmosphere are explored. We also explore the implications of these observations for documentation of bacterial sulfur metabolisms early in Earth's history.

  18. Investigation of laser dynamics, modulation and control by means of intra-cavity time varying perturbation

    NASA Technical Reports Server (NTRS)

    Harris, S. E.

    1973-01-01

    Work continued on a number of projects aimed at the generation of tunable visible, infrared, and ultraviolet light; and on the control of this light by means of novel mode-locking and modulation techniques. Progress is summarized for the following projects: (1) the transient modelocking of the Nd:YAG laser and application of short optical pulses; (2) studies of the sodium-xenon excimer laser; (3) development of techniques for vacuum ultraviolet holography; and (4) studies of multiple photon pumped xenon and argon excimer lasers.

  19. Mass Spectrometry of Liquid Aniline Aerosol Particles by IR/UV Laser Irradiation.

    PubMed

    Zelenyuk, A; Cabalo, J; Baer, T; Miller, R E

    1999-05-01

    The first results are reported from a new single-particle two-color laser time-of-flight mass spectrometer, incorporating a combination of infrared (CO(2)) and UV (excimer) laser irradiation. This combination of lasers has the capability to effectively separate the desorption or evaporation step from the ionization step, thereby greatly improving the analytical capabilities of such an instrument. The results on liquid aerosols, such as aniline, show that prior evaporation of the aerosol particle with the IR laser increases the ion signal produced by the excimer laser by more than 2 orders of magnitude. In the case of nitrobenzene aerosols, the excimer laser alone produces no ions, while a very large signal is observed when the aerosol is first irradiated with the CO(2) laser. A simple model, based on the Coulomb explosion of the ionized aerosol, is used to estimate the number of ions generated by the excimer laser (∼10(5) ions). Experimental evidence based on the observed time delay of protonated aniline parent ions indicates that the laser irradiation of the liquid aerosol results in a stable neutral plasma which separates into positive and negative charges only after a 100-500-ns delay.

  20. Pulsed UV and ultrafast laser micromachining of surface structures

    NASA Astrophysics Data System (ADS)

    Apte, Paul; Sykes, Neil

    2015-07-01

    We describe and compare the cutting and patterning of various "difficult" materials using pulsed UV Excimer, picosecond and femtosecond laser sources. Beam delivery using both fast galvanometer scanners and scanning mask imaging are described. Each laser source has its own particular strengths and weaknesses, and the optimum choice for an application is also decided by financial constraints. With some materials notable improvements in process quality have been observed using femtosecond lasers compared to picosecond lasers, which makes for an interesting choice now that cost effective reliable femtosecond systems are increasingly available. By contrast Pulsed UV Excimer lasers offer different imaging characteristics similar to mask based Lithographic systems and are particularly suited to the processing of polymers. We discuss optimized beam delivery techniques for these lasers.