Science.gov

Sample records for actuated mems scanning

  1. Wide-Angle-Scanning Reflectarray Antennas Actuated by MEMS

    NASA Technical Reports Server (NTRS)

    Fang, Houfei; Huang, John; Thomson, Mark W.

    2009-01-01

    An effort to develop large-aperture, wide-angle-scanning reflectarray antennas for microwave radar and communication systems is underway. In an antenna of this type as envisioned, scanning of the radiated or incident microwave beam would be effected through mechanical rotation of the passive (reflective) patch antenna elements, using microelectromechanical systems (MEMS) stepping rotary actuators typified by piezoelectric micromotors. It is anticipated that the cost, mass, and complexity of such an antenna would be less than, and the reliability greater than, those of an electronically scanned phased-array antenna of comparable beam-scanning capability and angular resolution. In the design and operation of a reflectarray, one seeks to position and orient an array of passive patch elements in a geometric pattern such that, through constructive interference of the reflections from them, they collectively act as an efficient single reflector of radio waves within a desired frequency band. Typically, the patches lie in a common plane and radiation is incident upon them from a feed horn.

  2. Magnetic actuation for MEMS scanners for retinal scanning displays

    NASA Astrophysics Data System (ADS)

    Yan, Jun; Luanava, Selso; Casasanta, Vincenzo

    2003-01-01

    We discuss magnetic actuation for Microvision"s bi-axial scanners for retinal scanning displays. Compared to the common side-magnet and moving-coil approach, we have designed, assembled and tested a novel magnet configuration, with magnets above and below the moving coil. This design reduces the magnet sizes significantly without sacrificing performance, and opens further improvement paths as well.

  3. Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror.

    PubMed

    Zhang, Hao; Xu, Dacheng; Zhang, Xiaoyang; Chen, Qiao; Xie, Huikai; Li, Suiqiong

    2015-12-10

    In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated. The MEMS mirror consists of four thermal bimorph actuators symmetrically located at the four sides of a central mirror plate. Experiments show that an actuation characteristics difference of as much as 4.0% exists among the four actuators due to process variations, which leads to an average angular scan error of 0.03°. A mathematical model between the actuator input voltage and the mirror-plate position has been developed to predict the actuation behavior of the mirror. It is a four-input, four-output model that takes into account the thermal-mechanical coupling and the differences among the four actuators; the vertical positions of the ends of the four actuators are also monitored. Based on this model, an open-loop control method is established to achieve accurate angular scanning. This model-based open loop control has been experimentally verified and is useful for the accurate control of the mirror. With this control method, the precise actuation of the mirror solely depends on the model prediction and does not need the real-time mirror position monitoring and feedback, greatly simplifying the MEMS control system.

  4. Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror

    PubMed Central

    Zhang, Hao; Xu, Dacheng; Zhang, Xiaoyang; Chen, Qiao; Xie, Huikai; Li, Suiqiong

    2015-01-01

    In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated. The MEMS mirror consists of four thermal bimorph actuators symmetrically located at the four sides of a central mirror plate. Experiments show that an actuation characteristics difference of as much as 4.0% exists among the four actuators due to process variations, which leads to an average angular scan error of 0.03°. A mathematical model between the actuator input voltage and the mirror-plate position has been developed to predict the actuation behavior of the mirror. It is a four-input, four-output model that takes into account the thermal-mechanical coupling and the differences among the four actuators; the vertical positions of the ends of the four actuators are also monitored. Based on this model, an open-loop control method is established to achieve accurate angular scanning. This model-based open loop control has been experimentally verified and is useful for the accurate control of the mirror. With this control method, the precise actuation of the mirror solely depends on the model prediction and does not need the real-time mirror position monitoring and feedback, greatly simplifying the MEMS control system. PMID:26690432

  5. MEMS fluidic actuator

    DOEpatents

    Kholwadwala, Deepesh K.; Johnston, Gabriel A.; Rohrer, Brandon R.; Galambos, Paul C.; Okandan, Murat

    2007-07-24

    The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.

  6. Microelectromechanical (MEM) thermal actuator

    DOEpatents

    Garcia, Ernest J [Albuquerque, NM; Fulcher, Clay W. G. [Sandia Park, NM

    2012-07-31

    Microelectromechanical (MEM) buckling beam thermal actuators are disclosed wherein the buckling direction of a beam is constrained to a desired direction of actuation, which can be in-plane or out-of-plane with respect to a support substrate. The actuators comprise as-fabricated, linear beams of uniform cross section supported above the substrate by supports which rigidly attach a beam to the substrate. The beams can be heated by methods including the passage of an electrical current through them. The buckling direction of an initially straight beam upon heating and expansion is controlled by incorporating one or more directional constraints attached to the substrate and proximal to the mid-point of the beam. In the event that the beam initially buckles in an undesired direction, deformation of the beam induced by contact with a directional constraint generates an opposing force to re-direct the buckling beam into the desired direction. The displacement and force generated by the movement of the buckling beam can be harnessed to perform useful work, such as closing contacts in an electrical switch.

  7. Polyimide MEMS actuators for medical imaging

    NASA Astrophysics Data System (ADS)

    Zara, Jason M.; Mills, Patrick; Patterson, Paul

    2005-01-01

    This paper provides an overview of several years of research in the use of polyimide MEMS actuators for medical imaging applications, including high frequency ultrasound and optical coherence tomography (OCT). These scanning devices are microfabricated out of polyimide substrates using conventional integrated circuit technology. The material properties of the polyimide allow very large scan angles to be realized and also allow the resonant frequencies of the structures to be in the appropriate ranges for real-time imaging. The primary application of these probes is endoscopic and catheter-based imaging procedures. The microfabrication enables the creation of very small devices essential for compact imaging probes. In addition, they can be fabricated in bulk, reducing their cost and potentially making them disposable to reduce the cost of patient care and minimize the potential for patient cross-contamination. Several different scanning geometries and actuators have been investigated for imaging applications, including both forward-viewing and side-scanning configurations. Probes that utilize both electrostatic polyimide actuators and piezoelectric bimorphs to mechanically scan the ultrasound or OCT imaging beams will be presented. These probes have been developed for both use in both ultrasound and OCT imaging systems. Medical applications of these probes include the early detection of cancerous and precancerous conditions in the bladder and other mucosal tissues. These imaging probes will allow the physician to visualize the subsurface microstructure of the tissues and detect abnormalities not visible through the use of conventional endoscopic imaging techniques. Prototype devices have been used to image geometric wire phantoms, in vitro porcine tissue, and in vivo subjects. The progress made over the last several years in the development of these polyimide scanning probes will be presented.

  8. High-actuator-count MEMS deformable mirrors

    NASA Astrophysics Data System (ADS)

    Helmbrecht, Michael A.; He, Min; Kempf, Carl J.

    2013-05-01

    Adaptive optics (AO) technology has enabled dramatic improvement in imaging performance for fields spanning astronomy, defense, microscopy, and retinal imaging. A critical component within the AO systems is the deformable mirror (DM) that implements the actual wavefront correction. This paper introduces the Iris AO segmented MEMS DM technology with an overview of the fabrication process and a description of the DM operation. The paper demonstrates correction capabilities of 111 and 489 actuator DMs and describes recent effort for scaling to 1000-actuator class DMs. Finally, the paper presents laser testing results of dielectric coated DMs and describes the development path for MEMS DMs capable of 2.8 kW/cm2 average laser power.

  9. Hydraulically amplified PZT mems actuator

    DOEpatents

    Miles, Robin R.

    2004-11-02

    A hydraulically amplified microelectromechanical systems actuator. A piece of piezoelectric material or stacked piezo bimorph is bonded or deposited as a thin film. The piece is operatively connected to a primary membrane. A reservoir is operatively connected to the primary membrane. The reservoir contains a fluid. A membrane is operatively connected to the reservoir. In operation, energizing the piezoelectric material causing the piezoelectric material to bow. Bowing of the piezoelectric material causes movement of the primary membrane. Movement of the primary membrane results in a force in being transmitted to the liquid in the reservoir. The force in the liquid causes movement of the membrane. Movement of the membrane results in an operating actuator.

  10. MEMS Actuators for Improved Performance and Durability

    NASA Astrophysics Data System (ADS)

    Yearsley, James M.

    Micro-ElectroMechanical Systems (MEMS) devices take advantage of force-scaling at length scales smaller than a millimeter to sense and interact with directly with phenomena and targets at the microscale. MEMS sensors found in everyday devices like cell-phones and cars include accelerometers, gyros, pressure sensors, and magnetic sensors. MEMS actuators generally serve more application specific roles including micro- and nano-tweezers used for single cell manipulation, optical switching and alignment components, and micro combustion engines for high energy density power generation. MEMS rotary motors are actuators that translate an electric drive signal into rotational motion and can serve as rate calibration inputs for gyros, stages for optical components, mixing devices for micro-fluidics, etc. Existing rotary micromotors suffer from friction and wear issues that affect lifetime and performance. Attempts to alleviate friction effects include surface treatment, magnetic and electrostatic levitation, pressurized gas bearings, and micro-ball bearings. The present work demonstrates a droplet based liquid bearing supporting a rotary micromotor that improves the operating characteristics of MEMS rotary motors. The liquid bearing provides wear-free, low-friction, passive alignment between the rotor and stator. Droplets are positioned relative to the rotor and stator through patterned superhydrophobic and hydrophilic surface coatings. The liquid bearing consists of a central droplet that acts as the motor shaft, providing axial alignment between rotor and stator, and satellite droplets, analogous to ball-bearings, that provide tip and tilt stable operation. The liquid bearing friction performance is characterized through measurement of the rotational drag coefficient and minimum starting torque due to stiction and geometric effects. Bearing operational performance is further characterized by modeling and measuring stiffness, environmental survivability, and high

  11. Piezoelectric optical MEMS scanning fluorescence biosensor

    NASA Astrophysics Data System (ADS)

    Lo, Joe; Kim, Eun S.; Gundersen, Martin A.; Marcu, Laura

    2005-04-01

    Fluorescence spectroscopy plays a key role in a broad area of biological and medical applications. Development of fluorescence spectroscopy micro-devices will enable construction of fully integrated platforms for clinical diagnostics. We report the design, microfabrication and testing of a piezoelectric MEMS micro-grating as a part of the development of a combined spectral/time-resolved fluorescence biosensor for tissue characterization. For the design of the device, we simulated its theoretical performance using a piezoelectric multi-morph model with appropriate diffraction geometry. The microfabrication process was based on a SiN diaphragm (formed via KOH bulk-micromachining) on which the supporting layer of the micro-cantilevers was patterned. Piezoelectric ZnO was then magnetron sputtered and patterned on the cantilever as the physical source for linear actuation with low voltage (>32V). E-beam evaporation of aluminum formed the final reflective diffraction pattern as well as the electrode connections to the device units. The device actuation and displacement were characterized using LDDM (Laser Doppler Displacement Meter). Current cantilevers designed with 500 μm wide gratings (20 μm spacing) produced a maximum 38 μm bi-polar deflection at 3.5 kHz, with scanning from 350-650 nm at 26 nm resolution (10 nm with new 10 μm period prototype). The MEMS device was designed to be integrated with a fast response photomultiplier, and thus can be used with time-resolved fluorescence detection. Because in the case of time-resolved measurements, spectral resolution is not a crucial element, this configuration allows for the compensation of the geometric limitations (linear dispersion) of a micro-scale device that require wavelength differentiation and selection.

  12. Polarization Reconfigurable Patch Antenna Using Microelectromechanical Systems (MEMS) Actuators

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.; Chun, Donghoon; Katehi, Linda P. B.

    2002-01-01

    The paper demonstrates a nearly square patch antenna integrated with a novel microelectromechanical systems (MEMS) actuator for reconfiguring the polarization. Experimental results demonstrate that at a fixed frequency, the polarization can be reconfigured, from circular to linear.

  13. Scanning and rotating micromirrors using thermal actuators

    NASA Astrophysics Data System (ADS)

    Butler, Jeffrey T.; Bright, Victor M.; Reid, J. Robert

    1997-07-01

    This paper reports on micromachined polysilicon scanning and rotating micromirrors and the development of a CMOS drive system. The micromirrors described in this research were developed at the Air Force Institute of Technology and fabricated using the DARPA-sponsored multi-user MEMS processes (MUMPs). The scanning micromirror is connected to the substrate using micro-hinges. This allows the mirror plate to rotate off the substrate surface and lock into a support mechanism. The angle between the scanning mirror and the substrate is modulated by driving the mirror with a thermal actuator array through a range of 20 degrees. For the rotating mirror, the mirror plate is attached to the substrate by three floating substrate hinges connected to a rotating base. Actuator arrays are also used to position the rotating mirror. A computer controlled electrical interface was developed which automates the positioning of both the scanning and rotating mirrors. The low operating voltages of the micromirror positioning mechanism makes the use of CMOS technology attractive; and the development of a digital interface allows for flexible operation of the devices. These designs are well suited for micro-optical applications such as optical scanners, corner cube reflectors, and optical couplers where electrical positioning of a mirror is desired.

  14. Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices

    PubMed Central

    Zhang, Wen-Ming; Meng, Guang; Chen, Di

    2007-01-01

    Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary to understand the effects of electrostatic forces in MEMS and then many phenomena of practical importance, such as pull-in instability and the effects of effective stiffness, dielectric charging, stress gradient, temperature on the pull-in voltage, nonlinear dynamic effects and reliability due to electrostatic forces occurred in MEMS can be explained scientifically, and consequently the great potential of MEMS technology could be explored effectively and utilized optimally. A simplified parallel-plate capacitor model is proposed to investigate the resonance response, inherent nonlinearity, stiffness softened effect and coupled nonlinear effect of the typical electrostatically actuated MEMS devices. Many failure modes and mechanisms and various methods and techniques, including materials selection, reasonable design and extending the controllable travel range used to analyze and reduce the failures are discussed in the electrostatically actuated MEMS devices. Numerical simulations and discussions indicate that the effects of instability, nonlinear characteristics and reliability subjected to electrostatic forces cannot be ignored and are in need of further investigation.

  15. A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage

    PubMed Central

    Zhang, Xiaoyang; Duan, Can; Liu, Lin; Li, Xingde; Xie, Huikai

    2015-01-01

    Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonantscanning. The micro-platform has a large piston scan range of up to 800 µm at only 6V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 µm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications. PMID:26347583

  16. A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage.

    PubMed

    Zhang, Xiaoyang; Duan, Can; Liu, Lin; Li, Xingde; Xie, Huikai

    2015-09-01

    Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonantscanning. The micro-platform has a large piston scan range of up to 800 µm at only 6V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 µm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.

  17. Microelectromechanical Systems (MEMS) Actuator for Reconfigurable Patch Antenna Demonstrated

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.

    2001-01-01

    A microstrip patch antenna with two contact actuators along the radiating edges for frequency reconfiguration was demonstrated at K-band frequencies. The layout of the antenna is shown in the following figure. This antenna has the following advantages over conventional semiconductor varactor-diode-tuned patch antennas: 1. By eliminating the semiconductor diode and its nonlinear I-V characteristics, the antenna minimizes intermodulation signal distortion. This is particularly important in digital wireless systems, which are sensitive to intersymbol interference caused by intermodulation products. 2. Because the MEMS actuator is an electrostatic device, it does not draw any current during operation and, hence, requires a negligible amount of power for actuation. This is an important advantage for hand-held, battery-operated, portable wireless systems since the battery does not need to be charged frequently. 3. The MEMS actuator does not require any special epitaxial layers as in the case of diodes and, hence, is cost effective.

  18. Final report : compliant thermo-mechanical MEMS actuators, LDRD #52553.

    SciTech Connect

    Walraven, Jeremy Allen; Baker, Michael Sean; Headley, Thomas Jeffrey; Plass, Richard Anton

    2004-12-01

    Thermal actuators have proven to be a robust actuation method in surface-micromachined MEMS processes. Their higher output force and lower input voltage make them an attractive alternative to more traditional electrostatic actuation methods. A predictive model of thermal actuator behavior has been developed and validated that can be used as a design tool to customize the performance of an actuator to a specific application. This tool has also been used to better understand thermal actuator reliability by comparing the maximum actuator temperature to the measured lifetime. Modeling thermal actuator behavior requires the use of two sequentially coupled models, the first to predict the temperature increase of the actuator due to the applied current and the second to model the mechanical response of the structure due to the increase in temperature. These two models have been developed using Matlab for the thermal response and ANSYS for the structural response. Both models have been shown to agree well with experimental data. In a parallel effort, the reliability and failure mechanisms of thermal actuators have been studied. Their response to electrical overstress and electrostatic discharge has been measured and a study has been performed to determine actuator lifetime at various temperatures and operating conditions. The results from this study have been used to determine a maximum reliable operating temperature that, when used in conjunction with the predictive model, enables us to design in reliability and customize the performance of an actuator at the design stage.

  19. Modeling of biaxial gimbal-less MEMS scanning mirrors

    NASA Astrophysics Data System (ADS)

    von Wantoch, Thomas; Gu-Stoppel, Shanshan; Senger, Frank; Mallas, Christian; Hofmann, Ulrich; Meurer, Thomas; Benecke, Wolfgang

    2016-03-01

    One- and two-dimensional MEMS scanning mirrors for resonant or quasi-stationary beam deflection are primarily known as tiny micromirror devices with aperture sizes up to a few Millimeters and usually address low power applications in high volume markets, e.g. laser beam scanning pico-projectors or gesture recognition systems. In contrast, recently reported vacuum packaged MEMS scanners feature mirror diameters up to 20 mm and integrated high-reflectivity dielectric coatings. These mirrors enable MEMS based scanning for applications that require large apertures due to optical constraints like 3D sensing or microscopy as well as for high power laser applications like laser phosphor displays, automotive lighting and displays, 3D printing and general laser material processing. This work presents modelling, control design and experimental characterization of gimbal-less MEMS mirrors with large aperture size. As an example a resonant biaxial Quadpod scanner with 7 mm mirror diameter and four integrated PZT (lead zirconate titanate) actuators is analyzed. The finite element method (FEM) model developed and computed in COMSOL Multiphysics is used for calculating the eigenmodes of the mirror as well as for extracting a high order (n < 10000) state space representation of the mirror dynamics with actuation voltages as system inputs and scanner displacement as system output. By applying model order reduction techniques using MATLABR a compact state space system approximation of order n = 6 is computed. Based on this reduced order model feedforward control inputs for different, properly chosen scanner displacement trajectories are derived and tested using the original FEM model as well as the micromirror.

  20. Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

    NASA Astrophysics Data System (ADS)

    Hofmann, U.; Aikio, M.; Janes, J.; Senger, F.; Stenchly, V.; Weiss, M.; Quenzer, H.-J.; Wagner, B.; Benecke, W.

    2013-03-01

    Low-cost automotive laser scanners for environment perception are needed to enable the integration of advanced driver assistant systems (ADAS) into all automotive vehicle segments, a key to reducing the number of traffic accidents on roads. An omnidirectional 360 degree laser scanning concept has been developed based on combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. This omnidirectional scanning concept is the core of a small sized low-cost time-of-flight based range sensor development. This paper describes concept, design, fabrication and first measurement results of a resonant biaxial 7mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives. Identical frequencies of the two resonant axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen since it allows minimizing the frequency splitting of the two resonant axes. Low mirror curvature is achieved by a thickness of the mirror of more than 500 μm. Hermetic wafer level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable to achieve a large mechanical tilt angle of +/- 6.5 degrees in each axis. The 7mm-MEMS mirror demonstrates large angle circular scanning at 1.5kHz.

  1. Reconfigurable Array Antenna Using Microelectromechanical Systems (MEMS) Actuators

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.; Chun, Donghoon; Katehi, Linda P. B.

    2001-01-01

    The paper demonstrates a patch antenna integrated with a novel microelectromechanical systems (MEMS) actuator for reconfiguring the operating frequency. Experimental results demonstrate that the center frequency can be reconfigured by as much as 1.6 percent of the nominal operating frequency at K-Band In addition, a novel on-wafer antenna pattern measurement technique is demonstrated.

  2. Compact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe.

    PubMed

    Mu, Xiaojing; Zhou, Guangya; Yu, Hongbin; Du, Yu; Feng, Hanhua; Tsai, Julius Ming Lin; Chau, Fook Siong

    2012-03-12

    A novel prototype of an electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro-reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, thus enabling a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scanning. This MEMS platform is ultra-compact, supports circumferential imaging capability and is suitable for endoscopic optical coherence tomography (EOCT) applications, for example, for intravascular cancer detection.

  3. On electrostatically actuated NEMS/MEMS circular plates

    NASA Astrophysics Data System (ADS)

    Caruntu, Dumitru I.; Alvarado, Iris

    2011-04-01

    This paper deals with electrostatically actuated micro and nano-electromechanical (MEMS/NEMS) circular plates. The system under investigation consists of two bodies, a deformable and conductive circular plate placed above a fixed, rigid and conductive ground plate. The deformable circular plate is electrostatically actuated by applying an AC voltage between the two plates. Nonlinear parametric resonance and pull-in occur at certain frequencies and relatively large AC voltage, respectively. Such phenomena are useful for applications such as sensors, actuators, switches, micro-pumps, micro-tweezers, chemical and mass sensing, and micro-mirrors. A mathematical model of clamped circular MEMS/NEMS electrostatically actuated plates has been developed. Since the model is in the micro- and nano-scale, surface forces, van der Waals and/or Casimir, acting on the plate are included. A perturbation method, the Method of Multiple Scales (MMS), is used for investigating the case of weakly nonlinear MEMS/NEMS circular plates. Two time scales, fast and slow, are considered in this work. The amplitude-frequency and phase-frequency response of the plate in the case of primary resonance are obtained and discussed.

  4. Design and fabrication of a MEMS chevron-type thermal actuator

    SciTech Connect

    Baracu, Angela; Voicu, Rodica; Müller, Raluca; Avram, Andrei; Pustan, Marius Chiorean, Radu Birleanu, Corina Dudescu, Cristian

    2015-02-17

    This paper presents the design and fabrication of a MEMS chevron-type thermal actuator. The device was designed for fabrication in the standard MEMS technology, where the topography of the upper layers depends on the patterns of structural and sacrificial layers underneath. The proposed actuator presents some advantages over usual thermal vertical chevron actuators by means of low operating voltages, high output force and linear movement without deformation of the shaft. The device simulations were done using COVENTOR software. The movement obtained by simulation was 12 μm, for a voltage of 0.2 V and the current intensity of 257 mA. The design optimizes the in-plane displacement by fixed anchors and beam inclination angle. Heating is provided by Joule dissipation. The material used for manufacture of chevron-based actuator was aluminum due to its thermal and mechanical properties. The release of the movable part was performed using isotropic dry etching by Reactive Ion Etching (RIE). A first inspection was achieved using Scanning Electron Microscope (SEM). In order to obtain the in-plane displacement we carried out electrical measurements. The thermal actuator can be used for a variety of optical and microassembling applications. This kind of thermal actuator could be integrated easily with other micro devices since its fabrication is compatible with the general semiconductor processes.

  5. In-plane DEAP stack actuators for optical MEMS applications

    NASA Astrophysics Data System (ADS)

    Brunne, Jens; Kazan, Samar; Wallrabe, Ulrike

    2011-04-01

    Recently, stacked dielectric polymer actuators have gained a lot of attention as MEMS actuators. In this paper we present a new kind of in-plane stack actuator. In contrast to its multilayer counterparts, it consists of only one active layer with inter-digitated microstructured soft electrodes which allow for a linear, radial or even asymmetric pulling motion in the working plane. The single layer design makes it in principle compatible with standard MEMS processes like deep reactive ion etching as well as silicone casting for optical components. Nevertheless, the wafer level fabrication process does not require any photolithography or clean room processes. The actuator consists of a microstructured layer of carbon black or nanotube filled PDMS which is suspended over a KOH etched trench on a (111) silicon wafer. The conductive PDMS electrodes are structured by laser ablation and subsequently embedded in a dielectric. The use of a (111) silicon wafer enables a mask less definition of the trench as the (111) layer is almost not attacked by the KOH etchant. The trench is defined by laser induced damage of the silicon wafer, so only exposed areas are etched. This allows for a true rapid prototyping of actuators with a fabrication time of less than one day.

  6. Large Actuator Count MEMS Deformable Mirror Development

    DTIC Science & Technology

    2010-06-07

    Large-actuator-count deformable mirrors (DM) are essential for high-contrast imaging systems NASA is developing for exoplanet detection. These same...applications: Nulling coronagraphs for exoplanet imaging, Atmospheric turbulence compensation for free-space laser communication, laser guide star

  7. Aligning Optical Fibers by Means of Actuated MEMS Wedges

    NASA Technical Reports Server (NTRS)

    Morgan, Brian; Ghodssi, Reza

    2007-01-01

    Microelectromechanical systems (MEMS) of a proposed type would be designed and fabricated to effect lateral and vertical alignment of optical fibers with respect to optical, electro-optical, optoelectronic, and/or photonic devices on integrated circuit chips and similar monolithic device structures. A MEMS device of this type would consist of a pair of oppositely sloped alignment wedges attached to linear actuators that would translate the wedges in the plane of a substrate, causing an optical fiber in contact with the sloping wedge surfaces to undergo various displacements parallel and perpendicular to the plane. In making it possible to accurately align optical fibers individually during the packaging stages of fabrication of the affected devices, this MEMS device would also make it possible to relax tolerances in other stages of fabrication, thereby potentially reducing costs and increasing yields. In a typical system according to the proposal (see Figure 1), one or more pair(s) of alignment wedges would be positioned to create a V groove in which an optical fiber would rest. The fiber would be clamped at a suitable distance from the wedges to create a cantilever with a slight bend to push the free end of the fiber gently to the bottom of the V groove. The wedges would be translated in the substrate plane by amounts Dx1 and Dx2, respectively, which would be chosen to move the fiber parallel to the plane by a desired amount Dx and perpendicular to the plane by a desired amount Dy. The actuators used to translate the wedges could be variants of electrostatic or thermal actuators that are common in MEMS.

  8. A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range

    PubMed Central

    Wang, Wei; Chen, Jiapin; Zivkovic, Aleksandar. S.; Xie, Huikai

    2016-01-01

    A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified lateral-shift-free (LSF) bimorph actuator design with large piston and reduced tilting. Combined with a position-sensitive device (PSD) for tilt angle sensing, the feedback controlled MEMS mirror generates a 430 µm stable linear piston scan with the mirror plate tilting angle less than ±0.002°. The usable piston scan range is increased to 78% of the MEMS mirror’s full scan capability, and a spectral resolution of 0.55 nm at 531.9 nm wavelength, has been achieved. It is a significant improvement compared to the prior work. PMID:27690047

  9. Hardware implementation of an electrostatic MEMS-actuator linearization

    NASA Astrophysics Data System (ADS)

    Mair, F.; Egretzberger, M.; Kugi, A.

    2011-06-01

    In this paper, an electrostatic actuator linearization will be introduced, which is based on an existing hardware-efficient iterative square root algorithm. The algorithm is solely based on add and shift operations while just needing n/2 iterations for an n bit wide input signal. As a practical example, the nonlinear input transformation will be utilized for the design of the primary mode controller of a capacitive MEMS gyroscope and an implementation of the algorithm in the Verilog hardware description language will be instantiated. Finally, measurement results will validate the feasibility of the presented control concept and its hardware implementation.

  10. MEMS-BASED 3D CONFOCAL SCANNING MICROENDOSCOPE USING MEMS SCANNERS FOR BOTH LATERAL AND AXIAL SCAN

    PubMed Central

    Liu, Lin; Wang, Erkang; Zhang, Xiaoyang; Liang, Wenxuan; Li, Xingde; Xie, Huikai

    2014-01-01

    A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ± 26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope. PMID:25013304

  11. Self-assembled polymer MEMS sensors and actuators

    NASA Astrophysics Data System (ADS)

    Hill, Andrea J.; Claus, Richard O.; Lalli, Jennifer H.; Homer, Michelle

    2006-03-01

    This paper describes the use of Metal Rubber TM, which is an electrically-conductive, low modulus, highly-flexible, and optically transparent free-standing or conformal coating nanocomposite material that is fabricated via Electrostatic Self-Assembly (ESA), as a polymer MEMS sensor for actuator materials. ESA is an environmentally-friendly layer-by-layer fabrication technique in which Metal Rubber TM can be tailor designed at the molecular level to function as a sensor and/or electrode for active polymer devices. With its controllable and tailorable properties (such as mechanical modulus [from less than 0.1 MPa to greater than 500 MPa], electrical conductivity, sensitivity to flex and strain (tension and compression), thickness, transmission, glass transition, and more), Metal Rubber TM exhibits massive improvements over traditional stiff electrodes and sensors (with bulky/heavy wire components) that physically constrain the actuator device motion and thus limit productivity. Metal RubberTM shows exceptional potential for use as flexible sensors, electrodes, and interconnect components for many active polymer applications. One example of such is NanoSonic's Metal Rubber TM-Polymer MEMS (MR TM-PMEMS) nanocluster-based corrosion sensor for aircraft coatings that was developed for an Air Force SBIR program. MR TM-PMEMS was tailored via ESA for use as an in-situ sensor of chemical modifications and the breakdown of surface coatings via micro-strain measurements.

  12. Validation of thermal models for a prototypical MEMS thermal actuator.

    SciTech Connect

    Gallis, Michail A.; Torczynski, John Robert; Piekos, Edward Stanley; Serrano, Justin Raymond; Gorby, Allen D.; Phinney, Leslie Mary

    2008-09-01

    This report documents technical work performed to complete the ASC Level 2 Milestone 2841: validation of thermal models for a prototypical MEMS thermal actuator. This effort requires completion of the following task: the comparison between calculated and measured temperature profiles of a heated stationary microbeam in air. Such heated microbeams are prototypical structures in virtually all electrically driven microscale thermal actuators. This task is divided into four major subtasks. (1) Perform validation experiments on prototypical heated stationary microbeams in which material properties such as thermal conductivity and electrical resistivity are measured if not known and temperature profiles along the beams are measured as a function of electrical power and gas pressure. (2) Develop a noncontinuum gas-phase heat-transfer model for typical MEMS situations including effects such as temperature discontinuities at gas-solid interfaces across which heat is flowing, and incorporate this model into the ASC FEM heat-conduction code Calore to enable it to simulate these effects with good accuracy. (3) Develop a noncontinuum solid-phase heat transfer model for typical MEMS situations including an effective thermal conductivity that depends on device geometry and grain size, and incorporate this model into the FEM heat-conduction code Calore to enable it to simulate these effects with good accuracy. (4) Perform combined gas-solid heat-transfer simulations using Calore with these models for the experimentally investigated devices, and compare simulation and experimental temperature profiles to assess model accuracy. These subtasks have been completed successfully, thereby completing the milestone task. Model and experimental temperature profiles are found to be in reasonable agreement for all cases examined. Modest systematic differences appear to be related to uncertainties in the geometric dimensions of the test structures and in the thermal conductivity of the

  13. Design and reliability of a MEMS thermal rotary actuator.

    SciTech Connect

    Baker, Michael Sean; Corwin, Alex David

    2007-09-01

    A new rotary MEMS actuator has been developed and tested at Sandia National Laboratories that utilizes a linear thermal actuator as the drive mechanism. This actuator was designed to be a low-voltage, high-force alternative to the existing electrostatic torsional ratcheting actuator (TRA) [1]. The new actuator, called the Thermal Rotary Actuator (ThRA), is conceptually much simpler than the TRA and consists of a gear on a hub that is turned by a linear thermal actuator [2] positioned outside of the gear. As seen in Figure 1, the gear is turned through a ratcheting pawl, with anti-reverse pawls positioned around the gear for unidirectional motion (see Figure 1). A primary consideration in the design of the ThRA was the device reliability and in particular, the required one-to-one relationship between the ratcheting output motion and the electrical input signal. The electrostatic TRA design has been shown to both over-drive and under-drive relative to the number of input pulses [3]. Two different ThRA designs were cycle tested to measure the skip rate. This was done in an automated test setup by using pattern matching to measure the angle of rotation of the output gear after a defined number of actuation pulses. By measuring this gear angle over time, the number of skips can be determined. Figure 2 shows a picture of the ThRA during testing, with the pattern-matching features highlighted. In the first design tested, it was found that creep in the thermal actuator limited the number of skip-free cycles, as the rest position of the actuator would creep forward enough to prevent the counter-rotation pawls from fully engaging (Figure 3). Even with this limitation, devices were measured with up to 100 million cycles with no skipping. A design modification was made to reduce the operating temperature of the thermal actuator which has been shown in a previous study [2] to reduce the creep rate. In addition, changes were made to the drive ratchet design and actuation

  14. MEMS-based high speed scanning probe microscopy.

    PubMed

    Disseldorp, E C M; Tabak, F C; Katan, A J; Hesselberth, M B S; Oosterkamp, T H; Frenken, J W M; van Spengen, W M

    2010-04-01

    The high speed performance of a scanning probe microscope (SPM) is improved if a microelectromechanical systems (MEMS) device is employed for the out-of-plane scanning motion. We have carried out experiments with MEMS high-speed z-scanners (189 kHz fundamental resonance frequency) in both atomic force microscope and scanning tunneling microscope modes. The experiments show that with the current MEMS z-scanner, lateral tip speeds of 5 mm/s can be achieved with full feedback on surfaces with significant roughness. The improvement in scan speed, obtained with MEMS scanners, increases the possibilities for SPM observations of dynamic processes. Even higher speed MEMS scanners with fundamental resonance frequencies in excess of a megahertz are currently under development.

  15. MEMS-based non-rotatory circumferential scanning optical probe for endoscopic optical coherence tomography

    NASA Astrophysics Data System (ADS)

    Xu, Yingshun; Singh, Janak; Siang, Teo Hui; Ramakrishna, Kotlanka; Premchandran, C. S.; Sheng, Chen Wei; Kuan, Chuah Tong; Chen, Nanguang; Olivo, Malini C.; Sheppard, Colin J. R.

    2007-07-01

    In this paper, we present a non-rotatory circumferential scanning optical probe integrated with a MEMS scanner for in vivo endoscopic optical coherence tomography (OCT). OCT is an emerging optical imaging technique that allows high resolution cross-sectional imaging of tissue microstructure. To extend its usage to endoscopic applications, a miniaturized optical probe based on Microelectromechanical Systems (MEMS) fabrication techniques is currently desired. A 3D electrothermally actuated micromirror realized using micromachining single crystal silicon (SCS) process highlights its very large angular deflection, about 45 degree, with low driving voltage for safety consideration. The micromirror is integrated with a GRIN lens into a waterproof package which is compatible with requirements for minimally invasive endoscopic procedures. To implement circumferential scanning substantially for diagnosis on certain pathological conditions, such as Barret's esophagus, the micromirror is mounted on 90 degree to optical axis of GRIN lens. 4 Bimorph actuators that are connected to the mirror on one end via supporting beams and springs are selected in this micromirror design. When actuators of the micromirror are driven by 4 channels of sinusoidal waveforms with 90 degree phase differences, beam focused by a GRIN is redirected out of the endoscope by 45 degree tilting mirror plate and achieve circumferential scanning pattern. This novel driving method making full use of very large angular deflection capability of our micromirror is totally different from previously developed or developing micromotor-like rotatory MEMS device for circumferential scanning.

  16. MEMS-Based Piezoelectric/Electrostatic Inchworm Actuator

    NASA Technical Reports Server (NTRS)

    Yang, Eui-Hyeok

    2003-01-01

    A proposed inchworm actuator, to be designed and fabricated according to the principles of microelectromechanical systems (MEMS), would effect linear motion characterized by steps as small as nanometers and an overall range of travel of hundreds of microns. Potential applications for actuators like this one include precise positioning of optical components and active suppression of noise and vibration in scientific instruments, conveyance of wafers in the semiconductor industry, precise positioning for machine tools, and positioning and actuation of micro-surgical instruments. The inchworm motion would be generated by a combination of piezoelectric driving and electrostatic clamping. The actuator (see figure), would include a pair of holders (used for electrostatic clamping), a slider (the part that would engage in the desired linear motion), a driver, a piezoelectric stack under the driver, and a pair of polymer beams centrally clamped to the flexure beam via a T bar. The holders would be held stationary. One end of the piezoelectric stack would be held stationary; the other end would be connected to the bottom of the driver, which would be free to move up and down. All of these components except the piezoelectric stack and the polymer beams would be micromachined from a 500- m-thick silicon wafer by deep reactive-ion etching. The inchworm motion would be perpendicular to the broad faces of the wafer (perpendicular to the plane of the figure). The combination of the polymer beams and the centrally clamped flexure beam would spring-bias the slider into a position such that, in the absence of electrostatic clamping, the gap between the slider on the one hand and both the driver and the holder on the other hand would be no more than a few microns. This arrangement would make it possible to electrostatically pull the slider into contact with either the holders or the driver at a clamping force of the order of 1 N by applying a reasonably small voltage (of the order of

  17. A two-axis water-immersible MEMS scanning mirror for scanning optical and acoustic microscopy

    NASA Astrophysics Data System (ADS)

    Xu, Song; Huang, Chih-Hsien; Zou, Jun

    2016-03-01

    Fast scanning is highly desired for both ultrasound and photoacoustic microscopic imaging. Limited by water environment required for acoustic propagation, traditional mircoelectromechanical system (MEMS) scanning mirrors could not be widely used. In this paper, a new water-immersible scanning mirror microsystem has been designed, fabricated and tested. Polymer hinges were employed to achieve reliable under water performance. Two pairs of high strength neodymium magnet disc and three compact RF choke inductor were used to actuate mirror module. Experimental results show that the fast axis can reach a mechanical scanning angle of +/-15° at the resonance frequency of 350 Hz in air, and +/-12.5° at the resonance frequency of 240 Hz in water, respectively. The slow axis can reach a mechanical scanning angle of +/-15° at the resonance frequency of 20 Hz in air, and +/-12.5° at the resonance frequency of 13 Hz in water, respectively. The two scanning axes have very different resonance frequencies, which are suitable for raster scanning.

  18. Centimeter-scale MEMS scanning mirrors for high power laser application

    NASA Astrophysics Data System (ADS)

    Senger, F.; Hofmann, U.; v. Wantoch, T.; Mallas, C.; Janes, J.; Benecke, W.; Herwig, Patrick; Gawlitza, P.; Ortega-Delgado, M.; Grune, C.; Hannweber, J.; Wetzig, A.

    2015-02-01

    A higher achievable scan speed and the capability to integrate two scan axes in a very compact device are fundamental advantages of MEMS scanning mirrors over conventional galvanometric scanners. There is a growing demand for biaxial high speed scanning systems complementing the rapid progress of high power lasers for enabling the development of new high throughput manufacturing processes. This paper presents concept, design, fabrication and test of biaxial large aperture MEMS scanning mirrors (LAMM) with aperture sizes up to 20 mm for use in high-power laser applications. To keep static and dynamic deformation of the mirror acceptably low all MEMS mirrors exhibit full substrate thickness of 725 μm. The LAMM-scanners are being vacuum packaged on wafer-level based on a stack of 4 wafers. Scanners with aperture sizes up to 12 mm are designed as a 4-DOF-oscillator with amplitude magnification applying electrostatic actuation for driving a motor-frame. As an example a 7-mm-scanner is presented that achieves an optical scan angle of 32 degrees at 3.2 kHz. LAMM-scanners with apertures sizes of 20 mm are designed as passive high-Q-resonators to be externally excited by low-cost electromagnetic or piezoelectric drives. Multi-layer dielectric coatings with a reflectivity higher than 99.9 % have enabled to apply cw-laser power loads of more than 600 W without damaging the MEMS mirror. Finally, a new excitation concept for resonant scanners is presented providing advantageous shaping of intensity profiles of projected laser patterns without modulating the laser. This is of interest in lighting applications such as automotive laser headlights.

  19. Water-Immersible MEMS scanning mirror designed for wide-field fast-scanning photoacoustic microscopy

    NASA Astrophysics Data System (ADS)

    Yao, Junjie; Huang, Chih-Hsien; Martel, Catherine; Maslov, Konstantin I.; Wang, Lidai; Yang, Joon-Mo; Gao, Liang; Randolph, Gwendalyn; Zou, Jun; Wang, Lihong V.

    2013-03-01

    By offering images with high spatial resolution and unique optical absorption contrast, optical-resolution photoacoustic microscopy (OR-PAM) has gained increasing attention in biomedical research. Recent developments in OR-PAM have improved its imaging speed, but have sacrificed either the detection sensitivity or field of view or both. We have developed a wide-field fast-scanning OR-PAM by using a water-immersible MEMS scanning mirror (MEMS-ORPAM). Made of silicon with a gold coating, the MEMS mirror plate can reflect both optical and acoustic beams. Because it uses an electromagnetic driving force, the whole MEMS scanning system can be submerged in water. In MEMS-ORPAM, the optical and acoustic beams are confocally configured and simultaneously steered, which ensures uniform detection sensitivity. A B-scan imaging speed as high as 400 Hz can be achieved over a 3 mm scanning range. A diffraction-limited lateral resolution of 2.4 μm in water and a maximum imaging depth of 1.1 mm in soft tissue have been experimentally determined. Using the system, we imaged the flow dynamics of both red blood cells and carbon particles in a mouse ear in vivo. By using Evans blue dye as the contrast agent, we also imaged the flow dynamics of lymphatic vessels in a mouse tail in vivo. The results show that MEMS-OR-PAM could be a powerful tool for studying highly dynamic and time-sensitive biological phenomena.

  20. Development of scanning holographic display using MEMS SLM

    NASA Astrophysics Data System (ADS)

    Takaki, Yasuhiro

    2016-10-01

    Holography is an ideal three-dimensional (3D) display technique, because it produces 3D images that naturally satisfy human 3D perception including physiological and psychological factors. However, its electronic implementation is quite challenging because ultra-high resolution is required for display devices to provide sufficient screen size and viewing zone. We have developed holographic display techniques to enlarge the screen size and the viewing zone by use of microelectromechanical systems spatial light modulators (MEMS-SLMs). Because MEMS-SLMs can generate hologram patterns at a high frame rate, the time-multiplexing technique is utilized to virtually increase the resolution. Three kinds of scanning systems have been combined with MEMS-SLMs; the screen scanning system, the viewing-zone scanning system, and the 360-degree scanning system. The screen scanning system reduces the hologram size to enlarge the viewing zone and the reduced hologram patterns are scanned on the screen to increase the screen size: the color display system with a screen size of 6.2 in. and a viewing zone angle of 11° was demonstrated. The viewing-zone scanning system increases the screen size and the reduced viewing zone is scanned to enlarge the viewing zone: a screen size of 2.0 in. and a viewing zone angle of 40° were achieved. The two-channel system increased the screen size to 7.4 in. The 360-degree scanning increases the screen size and the reduced viewing zone is scanned circularly: the display system having a flat screen with a diameter of 100 mm was demonstrated, which generates 3D images viewed from any direction around the flat screen.

  1. Thin Film PZT Piezo MEMS for Micro-Robotic Angular Rate Sensing and Rotary Actuation

    DTIC Science & Technology

    2012-07-31

    Luz Sanchez, Rob Proie, Vishnu Ganesan, Joe Conroy, and Ron Polcawich July 31, 2012 U.S. Army Research Laboratory THIN FILM PZT PIEZO MEMS FOR...Caltech Angular rate sensing on 1-30 mg platform • 2 orders smaller than packaged state of the art gyroscope. • Integrated biomimetic PZT actuator

  2. Gyroscope and Micromirror Design Using Vertical-Axis CMOS-MEMS Actuation and Sensing

    DTIC Science & Technology

    2002-01-01

    Johnston, Jr., Mechanics of Materials, McGraw-Hill Book Co., Singapore, 1987, pp.574-583. [95] S.P. Timoshenko and J.N. Goodier , Theory of Elasticity...Using Vertical-Axis CMOS-MEMS Sensing and Actuation Bibliography[118] David F. Guillou, Suresh Santhanam and L. R. Carley, “Laminated, sacrificial-poly

  3. Progress on MEMS-scanned ladar

    NASA Astrophysics Data System (ADS)

    Stann, Barry L.; Dammann, John F.; Giza, Mark M.

    2016-05-01

    The Army Research Laboratory (ARL) has continued to research a short-range ladar imager for use on small unmanned ground vehicles (UGV) and recently small unmanned air vehicles (UAV). The current ladar brassboard is based on a micro-electro-mechanical system (MEMS) mirror coupled to a low-cost pulsed erbium fiber laser. It has a 5-6 Hz frame rate, an image size of 256 (h) x 128 (v) pixels, a 42º x 21º field of regard, 35 m range, eyesafe operation, and 40 cm range resolution with provisions for super-resolution. Experience with driving experiments on small ground robots and efforts to extend the use of the ladar to UAV applications has encouraged work to improve the ladar's performance. The data acquisition system can now capture range data from the three return pulses in a pixel (that is first, last, and largest return), and information such as elapsed time, operating parameters, and data from an inertial navigation system. We will mention the addition and performance of subsystems to obtain eye-safety certification. To meet the enhanced range requirement for the UAV application, we describe a new receiver circuit that improves the signal-to-noise (SNR) several-fold over the existing design. Complementing this work, we discuss research to build a low-capacitance large area detector that may enable even further improvement in receiver SNR. Finally, we outline progress to build a breadboard ladar to demonstrate increased range to 160 m. If successful, this ladar will be integrated with a color camera and inertial navigation system to build a data collection package to determine imaging performance for a small UAV.

  4. MEMS-based fabrication of multiple-degree-of-freedom ionic polymer-metal composite actuators

    NASA Astrophysics Data System (ADS)

    Chen, Zheng; Tan, Xiaobo

    2010-04-01

    Ionic polymer-metal composites (IPMC) are soft actuation materials with promising applications in robotics and biomedical devices. In this paper, a MEMS-based approach is presented for monolithic, batch fabrication of IPMC pectoral fin actuators that are capable of complex deformation. Such an actuator consists of multiple, individually controlled IPMC regions that are mechanically coupled through compliant, passive regions. Prototypes of artificial pectoral fins have been fabricated with the proposed method, and sophisticated deformation modes, including bending, twisting, and cupping, have been demonstrated, which shows the promise of the pectoral fin in robotic fish applications.

  5. The design and analysis of a MEMS electrothermal actuator

    NASA Astrophysics Data System (ADS)

    Suocheng, Wang; Yongping, Hao; Shuangjie, Liu

    2015-04-01

    This paper introduces a type of out-of-plane microelectrothermal actuator, which is based on the principle of bimetal film thermal expansion in the fuse. A polymer SU-8 material and nickel are used as the functional and structural materials of the actuator. Through heating the resistance wire using electricity, the actuator produces out-of-plane motion in the perpendicular axial direction of the device and the bias layer contact with the substrate, completing signal output. Using Coventorware software to establish the three-dimensional model, the geometric structure is optimized and the electrothermal capabilities are determined theoretically. From electrothermal analysis, the actuator's displacement is 18 μm and the temperature rises from 300 to 440 K under a voltage of 5 V and the response time is 5 ms. The actuator's displacement is 20 μm under a 100000 m/s2 acceleration in the accelerating field. In the coupled field, applying a 3 V voltage, the initial temperature is 300 K, while the acceleration is 50000 m/s2, the driving displacement of the actuator is 23 μm, and temperature rises to 400 K. Finally, through checking the stress in different field sources, the maximum stress of the actuator is smaller than the allowable stress of nickel. The results show that the electrothermal actuator has high reliability.

  6. Update on MEMS-based scanned beam imager

    NASA Astrophysics Data System (ADS)

    James, Richard; Gibson, Greg; Metting, Frank; Davis, Wyatt; Drabe, Christian

    2007-01-01

    In 2004, Microvision presented "Scanned Beam Medical Imager" as an introduction to our MEMS-based, full color scanned beam imaging system. This presentation will provide an update of the technological advancements since this initial work from 2004. This recent work includes the development of functional prototypes that are much smaller than previous prototypes using a design architecture that is easily scalable. Performance has been significantly improved by increasing the optical field of views and video refresh rate. Real-time image processing capabilities have been developed to enhance the image quality and functionality over a wide range of operating conditions. Actual images of various objects will be presented.

  7. MEMS scanned laser head-up display

    NASA Astrophysics Data System (ADS)

    Freeman, Mark O.

    2011-03-01

    Head-up displays (HUD) in automobiles and other vehicles have been shown to significantly reduce accident rates by keeping the driver's eyes on the road. The requirements for automotive HUDs are quite demanding especially in terms of brightness, dimming range, supplied power, and size. Scanned laser display technology is particularly well-suited to this application since the lasers can be very efficiently relayed to the driver's eyes. Additionally, the lasers are only turned on where the light is needed in the image. This helps to provide the required brightness while minimizing power and avoiding a background glow that disturbs the see-through experience. Microvision has developed a couple of HUD architectures that are presented herein. One design uses an exit pupil expander and relay optics to produce a high quality virtual image for built-in systems where the image appears to float above the hood of the auto. A second design uses a patented see-through screen technology and pico projector to make automotive HUDs available to anyone with a projector. The presentation will go over the basic designs for the two types of HUD and discuss design tradeoffs.

  8. Preliminary results of large-actuator-count MEMS DM development

    NASA Astrophysics Data System (ADS)

    Helmbrecht, Michael A.; He, Min; Rhodes, Patrick; Kempf, Carl J.

    2010-02-01

    Compensating for atmospheric turbulence in meter-class telescopes and for free-space communications can require deformable mirrors (DM) with hundreds of actuators. Advances in high-contrast imaging techniques and increased telescope sizes require DMs mirrors with thousands of actuators [1]-[3]. In response to these needs, Iris AO has been developing a nearly 500-actuator DM and is conducting pathfinding research into 3000-actuator class DMs. This paper begins with an overview of the segmented DM design and describes improvements made to the DM over the prior year in the areas of speed, high-quality dielectric coatings, and snap-in prevention structures. The paper then describes the next-generation PTT489 DM design and fabrication process. Failure modes encountered during fabrication are presented as well as test methods to detect the failure modes. Preliminary yield data are presented for the fabrication process as well. The paper concludes with a view to the future showing pathfinding research into 3000-actuator DMs.

  9. The Effects of Ionizing Radiation on Microelectromechanical Systems (MEMS) Actuators: Electrostatic, Electrothermal, and Residual Stress

    DTIC Science & Technology

    2003-03-25

    electrical and me- chanical properties while operating in a radiation environment. All three actuators are fabricated using the Cronos Multi-User MEMS...so that removal of the sacrificial material leaves a movable, three dimensional structure. Sandia′s SUMMiTT M process and Cronos ’ PolyMUMPs [17...SOIMUMPs [18] and MetalMUMPs [19] are all commercially-available surface micromachining processes. Cronos ’ PolyMUMPs process is detailed in Section 3.2

  10. Single pixel optical imaging using a scanning MEMS mirror

    NASA Astrophysics Data System (ADS)

    Li, Li; Stankovic, Vladimir; Stankovic, Lina; Li, Lijie; Cheng, Samuel; Uttamchandani, Deepak

    2011-02-01

    The paper describes a low-complexity optical imaging system using demagnifying optics, a single scanning MEMS mirror and a single photodetector. Light at visible wavelengths from the object passes through a lens assembly and is incident on a scanning MEMS micromirror. After reflection from the micromirror, a complete image of the object is projected at the image plane of the optical system where a single-element photodetector with a pinhole at its entrance is located. By tilting the micromirror in the x and y directions, the projected image is translated across the image plane in the x and y directions. The photodetector sequentially detects the intensity of different areas of the projected optical image, thereby enabling a digital image to be generated pixel-by-pixel. However, due to the noisy raw image obtained experimentally, an image enhancement algorithm based on iterative-combined wavelet and curvelet denoising has been developed. Using blind image quality indices (BIQI) as an objective performance measure, it is shown that the proposed image enhancement method enhances the raw image by up to 40% and outperforms state-of-the-art denoising methods for up to 10 units of BIQI.

  11. Enhanced Visualization of Fine Needles Under Sonographic Guidance Using a MEMS Actuator

    PubMed Central

    Shen, Zhiyuan; Zhou, Yufeng; Miao, Jianmin; Vu, Kien Fong

    2015-01-01

    Localization of a needle tip is important for biopsy examinations in clinics. However, the needle tip is sometimes difficult to discern under the guidance of sonography due to its poor visibility. A mini actuator that radiates a low-intensity ultrasound wave was manufactured using micro-electro-mechanical system (MEMS) technology. Interference between the radiated and diagnostic ultrasound pulses was observed as bright lines in the B-mode ultrasound image, from which the mini actuator could be recognized with ease. Because the distance between the mini actuator and the needle tip is fixed, the needle tip can be determined despite its inconsistent appearance in the sonography. Both gel phantom and ex vivo tissue evaluation showed that the needle tip can be determined reliably utilizing the acoustic interference pattern. PMID:25647740

  12. Enhanced visualization of fine needles under sonographic guidance using a MEMS actuator.

    PubMed

    Shen, Zhiyuan; Zhou, Yufeng; Miao, Jianmin; Vu, Kien Fong

    2015-01-30

    Localization of a needle tip is important for biopsy examinations in clinics. However, the needle tip is sometimes difficult to discern under the guidance of sonography due to its poor visibility. A mini actuator that radiates a low-intensity ultrasound wave was manufactured using micro-electro-mechanical system (MEMS) technology. Interference between the radiated and diagnostic ultrasound pulses was observed as bright lines in the B-mode ultrasound image, from which the mini actuator could be recognized with ease. Because the distance between the mini actuator and the needle tip is fixed, the needle tip can be determined despite its inconsistent appearance in the sonography. Both gel phantom and ex vivo tissue evaluation showed that the needle tip can be determined reliably utilizing the acoustic interference pattern.

  13. Chopping of near- and mid-infrared radiation using a curled electrostatic MEMS actuator

    NASA Astrophysics Data System (ADS)

    Dausch, David E.; Goodwin, Scott H.; Exarhos, Gregory J.

    2003-09-01

    An electrostatic MEMS actuator known as the "Artificial Eyelid" can be used as a micromechanical chopper for IR detectors. The actuator structure consists of a curled polymer/metal film stack which is microfabricated and released from an IR transparent substrate. The film stack is uncurled by applying an electric field between the curled film and the transparent fixed electrode on the substrate. These flexible film actuators can act as IR choppers, providing transmission of radiation to the sensor elements when open (curled) and reflection when closed (uncurled). Arrays of actuators were fabricated on ITO-coated glass substrates and ranged in size from 4 x 4 mm to 7.5 x 15 mm with individual elements ranging from 250 to 500 μm on a side. Actuation for devices with average radius of curvature of 120 μ was consistently achieved at 150-170 V operation with 98-100% of the elements functioning and long lifetimes. IR chopper characteristics were measured using a blackbody source and pyroelectric detector by applying sine and square wave voltage to the actuators at a frequency of 30 Hz. The capability of the artificial eyelid for chopping near- and mid-IR radiation, including future fabrication of devices using NiCo2O4 or NiRh2O4 films for IR transparent electrodes, will be discussed.

  14. Scanning laser beam displays based on a 2D MEMS

    NASA Astrophysics Data System (ADS)

    Niesten, Maarten; Masood, Taha; Miller, Josh; Tauscher, Jason

    2010-05-01

    The combination of laser light sources and MEMS technology enables a range of display systems such as ultra small projectors for mobile devices, head-up displays for vehicles, wearable near-eye displays and projection systems for 3D imaging. Images are created by scanning red, green and blue lasers horizontally and vertically with a single two-dimensional MEMS. Due to the excellent beam quality of laser beams, the optical designs are efficient and compact. In addition, the laser illumination enables saturated display colors that are desirable for augmented reality applications where a virtual image is used. With this technology, the smallest projector engine for high volume manufacturing to date has been developed. This projector module has a height of 7 mm and a volume of 5 cc. The resolution of this projector is WVGA. No additional projection optics is required, resulting in an infinite focus depth. Unlike with micro-display projection displays, an increase in resolution will not lead to an increase in size or a decrease in efficiency. Therefore future projectors can be developed that combine a higher resolution in an even smaller and thinner form factor with increased efficiencies that will lead to lower power consumption.

  15. Dynamic pull-in of parallel plate and torsional electrostatic MEMS actuators.

    SciTech Connect

    Nielson, Gregory N.; Barbastathis, George

    2005-02-01

    An analysis of the dynamic characteristics of pull-in for parallel-plate and torsional electrostatic actuators is presented. Traditionally, the analysis for pull-in has been done using quasi-static assumptions. However, it was recently shown experimentally that a step input can cause a decrease in the voltage required for pull-in to occur. We propose an energy-based solution for the step voltage required for pull-in that predicts the experimentally observed decrease in the pull-in voltage. We then use similar energy techniques to explore pull-in due to an actuation signal that is modulated depending on the sign of the velocity of the plate (i.e., modulated at the instantaneous mechanical resonant frequency). For this type of actuation signal, significant reductions in the pull-in voltage can theoretically be achieved without changing the stiffness of the structure. This analysis is significant to both parallel-plate and torsional electrostatic microelectromechanical systems (MEMS) switching structures where a reduced operating voltage without sacrificing stiffness is desired, as well as electrostatic MEMS oscillators where pull-in due to dynamic effects needs to be avoided.

  16. A versatile MEMS bimorph actuator with large vertical displacement and high resolution: Design and fabrication process

    NASA Astrophysics Data System (ADS)

    Rangra, Aarushee; Maninder, K.; Soni, Shilpi; Rangra, K. J.

    2016-04-01

    This paper presents design, simulation results and envisaged fabrication process for a versatile MEMS bimorph actuator with large out of plane displacement and high resolution. A comparative study of mechanical, thermal and electrical response of the micro-actuator is presented by using two well-known MEMS simulation tools. The bimorph structure measuring 700 × 1280 mm2 is fully integrable with CMOS fabrication process. It is indented for tunable filter applications where the precise vertical motion of the payload, the top metallic electrode anchored rigidly to bimorph `springs' spans the vertical range of 250-300 microns with submicron resolution. Each bimorph spring resembles a hair pin structure and is composed of materials with large difference in thermal expansion coefficients e.g. electroplated gold and polysilicon for optimal out-of-the plane deflection. The novel structure can also be configured for analog micro-mirror based optical and IR spectroscopy applications by controlling the actuation bias and top electrode surface parameters.

  17. Scalable, MEMS-enabled, vibrational tactile actuators for high resolution tactile displays

    NASA Astrophysics Data System (ADS)

    Xie, Xin; Zaitsev, Yuri; Velásquez-García, Luis Fernando; Teller, Seth J.; Livermore, Carol

    2014-12-01

    The design, fabrication, and characterization of a new type of tactile display for people with blindness or low vision is reported. Each tactile element comprises a piezoelectric extensional actuator that vibrates in plane, with a microfabricated scissor mechanism to convert the in-plane actuations into robust, higher-amplitude, out-of-plane (vertical) vibrations that are sensed with the finger pads. When the tactile elements are formed into a 2D array, information can be conveyed to the user by varying the pattern of vibrations in space and time. Analytical models and finite element analysis were used to design individual tactile elements, which were implemented with PZT actuators and both SU-8 and 3D-printed scissor amplifiers. The measured displacements of these 3 mm × 10 mm, MEMS-enabled tactile elements exceed 10 µm, in agreement with models, with measured forces exceeding 45 mN. The performance of the MEMS-enabled tactile elements is compared with the performance of larger, fully-macroscale tactile elements to demonstrate the scale dependence of the devices. The creation of a 28-element prototype is also reported, and the qualitative user experience with the individual tactile elements and displays is described.

  18. Low Voltage MEMS Digital Loudspeaker Array Based on Thin-film PZT Actuators

    NASA Astrophysics Data System (ADS)

    Fanget, S.; Casset, F.; Dejaeger, R.; Maire, F.; Desloges, B.; Deutzer, J.; Morisson, R.; Bohard, Y.; Laroche, B.; Escato, J.; Leclere, Q.

    This paper reports on the development of a Digital Loudspeaker Array (DLA) solution based on Pb(Zr0.52,Ti0.48)O3 (PZT) thin-film actuated membranes. These membranes called speaklets are arranged in a matrix and operate in a binary manner by emitting short pulses of sound pressure. Using the principle of additivity of pressures in the air, it is possible to reconstruct audible sounds. For the first time, electromechanical and acoustic characterizations are reported on a 256-MEMS-membranes DLA. Sounds audible as far as several meters from the loudspeaker have been generated using low voltage (8 V).

  19. Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry

    NASA Astrophysics Data System (ADS)

    Tapilouw, Abraham Mario; Chen, Liang-Chia; Xuan-Loc, Nguyen; Chen, Jin-Liang

    2014-08-01

    A Micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive industries. However, effective inspection systems are also needed to ensure the functional reliability of MEMS. This study developed a stroboscopic coherence scanning Interferometry (SCSI) technique for measuring key characteristics typically used as criteria in MEMS inspections. Surface profiles of MEMS both static and dynamic conditions were measured by means of coherence scanning Interferometry (CSI). Resonant frequencies of vibrating MEMS were measured by deformation of interferogram fringes for out-of-plane vibration and by image correlation for in-plane vibration. The measurement bandwidth of the developed system can be tuned up to three megahertz or higher for both in-plane and out-of-plane measurement of MEMS.

  20. Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers

    NASA Astrophysics Data System (ADS)

    Sandner, Thilo; Grasshoff, Thomas; Schenk, Harald; Kenda, Andreas

    2012-03-01

    A translatory MOEMS actuator with extraordinary large stroke - especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers (FTS) - is presented. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1.2 mm is realized by means of an optimized MEMS design using four pantograph suspensions of the comparative large mirror plate with 5mm diameter. The MOEMS device is driven electro - statically resonant and is manufactured in a CMOS compatible SOI process. Up to +/- 600 μm amplitude (typically 1mm stroke) has been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher driving efficiency. For FTS system integration the MOEMS actuator has been encapsulated in a hybrid optical vacuum package. In this paper we discuss the thermal influences of packaging technology on MOEMS behaviors more detail.

  1. All-optical photoacoustic microscopy using a MEMS scanning mirror

    NASA Astrophysics Data System (ADS)

    Chen, Sung-Liang; Xie, Zhixing; Ling, Tao; Wei, Xunbin; Guo, L. Jay; Wang, Xueding

    2013-03-01

    It has been studied that a potential marker to obtain prognostic information about bladder cancer is tumor neoangiogenesis, which can be quantified by morphometric characteristics such as microvascular density. Photoacoustic microscopy (PAM) can render sensitive three-dimensional (3D) mapping of microvasculature, providing promise to evaluate the neoangiogenesis that is closely related to the diagnosis of bladder cancer. To ensure good image quality, it is desired to acquire bladder PAM images from its inside via the urethra, like conventional cystoscope. Previously, we demonstrated all-optical PAM systems using polymer microring resonators to detect photoacoustic signals and galvanometer mirrors for laser scanning. In this work, we build a miniature PAM system using a microelectromechanical systems (MEMS) scanning mirror, demonstrating a prototype of an endoscopic PAM head capable of high imaging quality of the bladder. The system has high resolutions of 17.5 μm in lateral direction and 19 μm in the axial direction at a distance of 5.4 mm. Images of printed grids and the 3D structure of microvasculature in animal bladders ex vivo by the system are demonstrated.

  2. Simulation of Electrostatic Actuation in Interdigitated Comb Drive MEMS Resonator for Energy Harvester Applications

    NASA Astrophysics Data System (ADS)

    Sathya, S.; Pavithra, M.; Muruganand, S.

    2016-09-01

    This paper presents an actuation mechanism based on the interdigitated comb drive MEMS resonator. The important role of that device is to establish MEMS resonators for the second order systems. Comb drive model is one of the basic model which uses the principle of electrostatic and force can be generated for the capacitive sensors. This work is done by overlapping movable and fixed comb fingers which produces an energy. The specific range of the polyimide material properties of young's modulus of 3.1GPa and density of 1300 Kg/m3. Results are shown in the structural domain performance of a lateral motion which corresponds to the applying voltage between the interdigitated comb fingers. It has laterally driven about 40pm with driving voltage. Also the resonance frequency 24Hz and 15Hz with high quality factors are depending on the spring length 260pm and 360pm and structure thickness of 2μm and 5 μm. Here Finite element method (FEM) is used to simulate the various physics scenario and it is designed as two dimensional structure multiphysics domain. The prototype of comb drive MEMS resonator has been suitable for energy harvesting system applications.

  3. MEMS segmented-based adaptive optics scanning laser ophthalmoscope

    PubMed Central

    Manzanera, Silvestre; Helmbrecht, Michael A.; Kempf, Carl J.; Roorda, Austin

    2011-01-01

    The performance of a MEMS (micro-electro-mechanical-system) segmented deformable mirror was evaluated in an adaptive optics (AO) scanning laser ophthalmoscope. The tested AO mirror (Iris AO, Inc, Berkeley, CA) is composed of 37 hexagonal segments that allow piston/tip/tilt motion up to 5 μm stroke and ±5 mrad angle over a 3.5 mm optical aperture. The control system that implements the closed-loop operation employs a 1:1 matched 37-lenslet Shack-Hartmann wavefront sensor whose measurements are used to apply modal corrections to the deformable mirror. After a preliminary evaluation of the AO mirror optical performance, retinal images from 4 normal subjects over a 0.9°x0.9° field size were acquired through a 6.4 mm ocular pupil, showing resolved retinal features at the cellular level. Cone photoreceptors were observed as close as 0.25 degrees from the foveal center. In general, the quality of these images is comparable to that obtained using deformable mirrors based on different technologies. PMID:21559132

  4. Electromechanical study of polyurethane films with carbon black nanoparticles for MEMS actuators

    NASA Astrophysics Data System (ADS)

    Roussel, M.; Malhaire, C.; Deman, A.-L.; Chateaux, J.-F.; Petit, L.; Seveyrat, L.; Galineau, J.; Guiffard, B.; Seguineau, C.; Desmarres, J.-M.; Martegoutte, J.

    2014-05-01

    Pure polyurethane and nanocomposite carbon black (CB) polyurethane solutions were deposited by spin-coating on a silicon substrate using gold as the adhesion layer and electrode. Different test structures were achieved for electrical and mechanical characterizations. The incorporation of CB nanoparticles in the polyurethane matrix has a significant influence on the dielectric permittivity of the material with an increase of about one third of its value. The Young's modulus of PU and nanocomposite PU films was determined by different characterization methods. Nanoindentation experiments have pointed out a Young's modulus gradient through the film thickness. By performing mechanical tests (tensile, bulge, point deflection) on freestanding films, an average Young's modulus value of about 30 MPa was found as well as a residual stress value of about 0.4 MPa. However, no influence of the presence of the nanoparticles was found. Finally, several MEMS actuators were realized and characterized. At their fundamental resonance frequency, the actuation of the nanocomposite membranes is more efficient than that of pure polyurethane. However, the time constant of the material seems to provide a major barrier for the development of high-frequency PU-based micro-actuators.

  5. Speed enhancements for a 489-actuator, piston-tip-tilt segment, MEMS DM system

    NASA Astrophysics Data System (ADS)

    Helmbrecht, Michael A.; Besse, Marc; Kempf, Carl J.; He, Min

    2010-08-01

    Iris AO has been developing a 489-actuator, 163 piston-tip-tilt segment, deformable mirror system controlled with a personal computer. The system includes the MEMS-based DM, drive electronics, and a precision factory-calibrated position controller. The position controller implements both position limiting to keep DM segments within the safe operating region and calculates the actuator voltages that correspond to desired DM piston, tip, and tilt positions. This paper describes recent speed enhancements and benchmarking results for the 489-actuator deformable mirror system. Benchmarking showed an execution time of 157.5 μs from the start of the DM piston/tip/tilt (PTT) position controller operation to when the last bit was output from the computer interface card to the DM drive electronics. Initial testing of an asynchronous write operation for the computer interface card shows that the PTT controller function can return within 5 μs of a data transfer, thereby shortening the processor time required for a DM to an estimated 74.4 μs. All aspects that give rise to latencies and bandwidth are presented herein, namely: 1) PTT controller safe-operating-point limiting and voltage calculations; 2) computer interface and DAC latencies; 3) drive electronics bandwidth, and 4) DM bandwidth.

  6. MEMS scanning laser projection based on high-Q vacuum packaged 2D-resonators

    NASA Astrophysics Data System (ADS)

    Hofmann, U.; Eisermann, C.; Quenzer, H.-J.; Janes, J.; Schroeder, C.; Schwarzelbach, O.; Jensen, B.; Ratzmann, L.; Giese, T.; Senger, F.; Hagge, J.; Weiss, M.; Wagner, B.; Benecke, W.

    2011-03-01

    Small size, low power consumption and the capability to produce sharp images without need of an objective make MEMS scanning laser based pico-projectors an attractive solution for embedded cell-phone projection displays. To fulfil the high image resolution demands the MEMS scanning mirror has to show large scan angles, a large mirror aperture size and a high scan frequency. An additional important requirement in pico-projector applications is to minimize power consumption of the MEMS scanner to enable a long video projection time. Typically high losses in power are caused by gas damping. For that reason Fraunhofer ISIT has established a fabrication process for 2D-MEMS mirrors that includes vacuum encapsulation on 8-inch wafers. Quality factors as high as 145,000 require dedicated closed loop phase control electronics to enable stable image projection even at rapidly changing laser intensities. A capacitive feedback signal is the basis for controlling the 2D MEMS oscillation and for synchronising the laser sources. This paper reports on fabrication of two-axis wafer level vacuum packaged scanning micromirrors and its use in a compact laser projection display. The paper presents different approaches of overcoming the well-known reflex problem of packaged MEMS scanning mirrors.

  7. Design and fabrication of a low insertion loss capacitive RF MEMS switch with novel micro-structures for actuation

    NASA Astrophysics Data System (ADS)

    Li, Muhua; Zhao, Jiahao; You, Zheng; Zhao, Guanghong

    2017-01-01

    In this paper, we have developed an electrostatic driven capacitive RF MEMS switch. The actuation voltage is applied to the actuation electrodes, and the DC voltage is isolated from the signal line and RF signals. Actuation area and capacitance area are separated. Thanks to this structure, both low actuation voltage and low up-state capacitance are achieved. The switch can be integrated in RF systems without additional circuits to isolate the DC voltage, so the system is simplified. The proposed switch is fabricated and tested. The insertion loss and isolation of the fabricated switch are 0.29 dB and 20.5 dB at 35 GHz, respectively. The actuation voltage is 18.3 V.

  8. Modeling of electro-statically actuated two-axis (tip-tilt) MEMS torsion micro-mirrors for laser beamsteering

    NASA Astrophysics Data System (ADS)

    Edwards, C. L.; Boone, B. G.; Levine, W. S.; Davis, C. C.

    2007-04-01

    The availability of recently developed MEMS micro-mirror technology provides an opportunity to replace macro-scale actuators for free-space laser beamsteering in lidar and communication systems. Such an approach is under investigation at the Johns Hopkins University Applied Physics Laboratory for use on space-based platforms. Precision modeling of mirror pointing and its dynamics are critical to optimal design and control of MEMS beamsteerers. Beginning with Hornbeck's torque approach, this paper presents a first-principle, analytically closed-form torque model for an electro-statically actuated two-axis (tip-tilt) MEMS structure. An Euler dynamic equation formulation describes the gimbaled motion as a coupled pair of damped harmonic oscillators with a common forcing function. Static physical parameters such as MEMS mirror dimensions, facet mass, and height are inputs to the model as well as dynamic harmonic oscillator parameters such as damping and restoring constants fitted from measurements. A Taylor series expansion of the torque function provides valuable insights into basic one dimensional as well as two dimensional MEMS behavior, including operational sensitivities near "pull-in." The model also permits the natural inclusion and analysis of pointing noise sources such as electrical drive noise, platform vibration, and molecular Brownian motion. MATLAB and SIMULINK simulations illustrate performance sensitivities, controllability, and physical limitations, important considerations in the design of optimal pointing systems.

  9. Three-dimensional piezoelectric MEMS actuator by using sputtering deposition of Pb(Zr,Ti)O3 on microstructure sidewalls

    NASA Astrophysics Data System (ADS)

    Kanda, Kensuke; Moriue, Shingo; Fujita, Takayuki; Maenaka, Kazusuke

    2017-04-01

    For the realization of piezoelectric microelectromechanical systems (MEMS) with multiple degrees-of-freedom, lead zirconate titanate thin films were deposited and micropatterned on the sidewalls of a pre-etched substrate with a feature depth of several hundred micrometers. The piezoelectric test structures, consisting of concave geometries and cantilevers with vertical and sloped sidewalls were successfully fabricated onto a 4 inch full sized wafer. Characterization of the fundamental properties of the lead zirconate titanate thin films indicated values comparable to those deposited on flat substrates. Actuation tests demonstrated that the triangular column cantilevers can be driven both in-plane and out-of-plane. The deposition of lead zironate titanate thin films onto a vertical sidewall created bimorph cantilevers composed of piezo/non-piezo/piezo structures in the horizontal direction. The use of microfabrication techniques to deposit lead zironate titanate thin films on pre-etched substrates gives MEMS actuators with multiple degrees-of-freedom and batch process compatibility.

  10. A 2-axis Polydimethylsiloxane (PDMS) based electromagnetic MEMS scanning mirror for optical coherence tomography

    NASA Astrophysics Data System (ADS)

    Kim, Sehui; Lee, Changho; Kim, Jin Young; Lim, Geunbae; Kim, Jeehyun; Kim, Chulhong

    2016-03-01

    Optical coherence tomography (OCT) is a noninvasive imaging tool for visualizing cross-sectional images of biological tissues on a microscale. Various microelectromechanical system (MEMS) techniques have been applied to OCT for endoscopic catheters and handheld probes. Despite having several advantages such as compact sizes and high speeds for real-time imaging, the complexities of the fabrication processes and relatively high costs were bottlenecks for fast clinical translation and commercialization of the earlier MEMS scanners. To overcome these issues, we developed a 2-axis polydimethylsiloxane (PDMS)-based electromagnetic MEMS scanning mirror based on flexible, cost-effective, and handleable PDMS. The size of this MEMS scanner was 15 × 15 × 15 mm3. To realize the characteristics of the scanner, we obtained the DC/AC responses and scanning patterns. The measured maximum scanning angles were 16.6° and 11.6° along the X and Y axes, respectively. The resonance frequencies were 82 and 57 Hz along the X and Y axes, respectively. The scanning patterns (raster and Lissajous scan patterns) are also demonstrated by controlling the frequency and amplitude. Finally, we showed the in vivo 2D-OCT images of human fingers by using a spectral domain OCT system with a PDMSbased MEMS scanning mirror. We then reconstructed the 3D images of human fingers. The obtained field of view was 8 × 8 mm2. The PDMS-based MEMS scanning mirror has the potential to combine other optical modalities and be widely used in preclinical and clinical translation research.

  11. Designing of a Si-MEMS device with an integrated skeletal muscle cell-based bio-actuator.

    PubMed

    Fujita, Hideaki; Van Dau, Thanh; Shimizu, Kazunori; Hatsuda, Ranko; Sugiyama, Susumu; Nagamori, Eiji

    2011-02-01

    With the aim of designing a mechanical drug delivery system involving a bio-actuator, we fabricated a Micro Electro Mechanical Systems (MEMS) device that can be driven through contraction of skeletal muscle cells. The device is composed of a Si-MEMS with springs and ratchets, UV-crosslinked collagen film for cell attachment, and C2C12 muscle cells. The Si-MEMS device is 600 μm x 1000 μm in size and the width of the collagen film is 250 ~ 350 μm, which may allow the device to go through small blood vessels. To position the collagen film on the MEMS device, a thermo-sensitive polymer was used as the sacrifice-layer which was selectively removed with O₂ plasma at the positions where the collagen film was glued. The C2C12 myoblasts were seeded on the collagen film, where they proliferated and formed myotubes after induction of differentiation. When C2C12 myotubes were stimulated with electric pulses, contraction of the collagen film-C2C12 myotube complex was observed. When the edge of the Si-MEMS device was observed, displacement of ~8 μm was observed, demonstrating the possibility of locomotive movement when the device is placed on a track of adequate width. Here, we propose that the C2C12-collagen film complex is a new generation actuator for MEMS devices that utilize glucose as fuel, which will be useful in environments in which glucose is abundant such as inside a blood vessel.

  12. An optimal design of thermal-actuated and piezoresistive-sensed CMOS-MEMS resonant sensor

    NASA Astrophysics Data System (ADS)

    Wang, Chun-Chieh; Tsai, Chun-Yin; Chen, Tsung-Lin; Liao, Sin-Hao

    2013-11-01

    This paper proposes an optimal design of the thermal-actuated, piezoresistive-sensed resonator fabricated by a foundry-provided CMOS-MEMS process. The optimal design is achieved both by quantitatively comparing the mechanical properties of different composite films as well as by deriving an analytical model for determining the device dimensions. The analytical model includes a stress model of an asymmetric mechanical structure and a piezoresistivity model of the heavily doped, n-type polysilicon film. The analytical model predicts that the optimal length of the displacement sensor is 200 μm when the thermal actuator is 200 μm in length and the absorption plate is 100 μm in length. Additionally, the model predicts the resistivity of the polysilicon film of (6.8 ± 2.2) mΩ cm and the gauge factor of (6.8 ± 2.9) when the grain size is (250 ± 100) nm. Experimental results agree well with simulation results. Experimental data show that the resonant frequency of the device is 80.06 kHz and shifts to 79.8 kHz when a brick of Pt mass is deposited on the resonator. The mass of the Pt estimated from the frequency shift is 4.5419 × 10-12 kg, while estimated from the measured dimension is 4.4204 × 10-12 kg. Sensitivity of the resonant sensor is calculated to be 1.8 × 102 Hz ng-1. Experimental results further show that the polysilicon film used in the experiments has a grain size of (241 ± 105) nm, an average gauge factor of 5.56 and average resistivity of 5.5 mΩ cm.

  13. High-speed horizontal-path atmospheric turbulence correction using a large actuator-number MEMS spatial light modulator in an interferometric phase conjugation engine

    SciTech Connect

    Baker, K; Stappaerts, E; Gavel, D; Wilks, S; Tucker, J; Silva, D; Olsen, J; Olivier, S; Young, P; Kartz, M; Flath, L; Kruelivitch, P; Crawford, J; Azucena, O

    2004-03-04

    Atmospheric propagation results for a high-speed, large-actuator-number, adaptive optics system are presented. The system uses a MEMS-based spatial light modulator correction device with 1024 actuators. Tests over a 1.35 km path achieved correction speeds in excess of 800 Hz and Strehl ratios close to 0.5. The wave-front sensor was based on a quadrature interferometer that directly measures phase. This technique does not require global wave-front reconstruction, making it relatively insensitive to scintillation and phase residues. The results demonstrate the potential of large actuator number MEMS-based spatial light modulators to replace conventional deformable mirrors.

  14. Angle extended linear MEMS scanning system for 3D laser vision sensor

    NASA Astrophysics Data System (ADS)

    Pang, Yajun; Zhang, Yinxin; Yang, Huaidong; Zhu, Pan; Gai, Ye; Zhao, Jian; Huang, Zhanhua

    2016-09-01

    Scanning system is often considered as the most important part for 3D laser vision sensor. In this paper, we propose a method for the optical system design of angle extended linear MEMS scanning system, which has features of huge scanning degree, small beam divergence angle and small spot size for 3D laser vision sensor. The principle of design and theoretical formulas are derived strictly. With the help of software ZEMAX, a linear scanning optical system based on MEMS has been designed. Results show that the designed system can extend scanning angle from ±8° to ±26.5° with a divergence angle small than 3.5 mr, and the spot size is reduced for 4.545 times.

  15. Wafer-level vacuum-packaged two-axis MEMS scanning mirror for pico-projector application

    NASA Astrophysics Data System (ADS)

    Hofmann, Ulrich; Senger, Frank; Janes, Joachim; Mallas, Christian; Stenchly, Vanessa; von Wantoch, Thomas; Quenzer, Hans-Joachim; Weiss, Manfred

    2014-03-01

    Hermetic wafer level packaging of optical MEMS scanning mirrors is essential for mass-market applications. It is the key to enable reliable low-cost mass producible scanning solutions. Vacuum packaging of resonant MEMS scanning mirrors widens the parameter range specifically with respect to scan angle and scan frequency. It also allows extending the utilizable range of mirror aperture size based on the fact that the energy of the high-Q oscillator can be effectively conserved and accumulated. But there are also some drawbacks associated with vacuum packaging. This paper discusses the different advantageous and disadvantageous aspects of vacuum packaging of MEMS scanning mirrors with respect to laser projection displays. Improved MEMS scanning mirror designs are being presented which focus on overcoming previous limitations. Finally an outlook is presented on the suitability of this technology for very large aperture scanning mirrors to be used in high power laser applications.

  16. UAV-borne lidar with MEMS mirror-based scanning capability

    NASA Astrophysics Data System (ADS)

    Kasturi, Abhishek; Milanovic, Veljko; Atwood, Bryan H.; Yang, James

    2016-05-01

    Firstly, we demonstrated a wirelessly controlled MEMS scan module with imaging and laser tracking capability which can be mounted and flown on a small UAV quadcopter. The MEMS scan module was reduced down to a small volume of <90mm x 60mm x 40mm, weighing less than 40g and consuming less than 750mW of power using a ~5mW laser. This MEMS scan module was controlled by a smartphone via Bluetooth while flying on a drone, and could project vector content, text, and perform laser based tracking. Also, a "point-and-range" LiDAR module was developed for UAV applications based on low SWaP (Size, Weight and Power) gimbal-less MEMS mirror beam-steering technology and off-the-shelf OEM LRF modules. For demonstration purposes of an integrated laser range finder module, we used a simple off-the-shelf OEM laser range finder (LRF) with a 100m range, +/-1.5mm accuracy, and 4Hz ranging capability. The LRFs receiver optics were modified to accept 20° of angle, matching the transmitter's FoR. A relatively large (5.0mm) diameter MEMS mirror with +/-10° optical scanning angle was utilized in the demonstration to maintain the small beam divergence of the module. The complete LiDAR prototype can fit into a small volume of <70mm x 60mm x 60mm, and weigh <50g when powered by the UAV's battery. The MEMS mirror based LiDAR system allows for ondemand ranging of points or areas within the FoR without altering the UAV's position. Increasing the LRF ranging frequency and stabilizing the pointing of the laser beam by utilizing the onboard inertial sensors and the camera are additional goals of the next design.

  17. Asymmetric actuating structure generates negligible influence on the supporting base for high performance scanning probe microscopies

    NASA Astrophysics Data System (ADS)

    Yi Yan, Gang; Bin Liu, Yong; Hua Feng, Zhi

    2014-02-01

    An asymmetric actuating structure generating negligible influence on the supporting base for high performance scanning probe microscopies is proposed in this paper. The actuator structure consists of two piezostacks, one is used for actuating while the other is for counterbalancing. In contrast with balanced structure, the two piezostacks are installed at the same side of the supporting base. The effectiveness of the structure is proved by some experiments with the actuators fixed to the free end of a cantilever. Experimental results show that almost all of the vibration modes of the cantilever are suppressed effectively at a wide frequency range of 90 Hz-10 kHz.

  18. Lead zirconate titanate thin films for piezoelectric actuation and sensing of MEMS resonators

    NASA Astrophysics Data System (ADS)

    Piekarski, Brett Harold

    This research is focused on examining the potential benefits and limitations of applying sol-gel lead zirconate titanate (PZT) piezoelectric thin films to on-chip piezoelectrically driven RF microelectromechanical system (MEMS) resonators in the low frequency (LF) to very high frequency (VHF) frequency range. MEMS fabrication methods are presented for fabricating PZT-based MEMS resonator structures along with investigations into the resultant thin film residual stresses and material properties, and their impact on resonator frequency, beam curvature, and resonant mode shape. The PZT, silicon dioxide (SiO2), platinum (Pt), and silicon nitride (Si3N4) thin film material properties are characterized and validated by wafer bow, cantilever resonance, cantilever thermal-induced tip deflection and finite element modeling (FEM) techniques. The performance of the fabricated PZT-based MEMS resonators are presented and compared to previously demonstrated zinc oxide (ZnO) based resonators as well as to electrostatically based MEMS resonator designs. Resonators with frequency response peaks of greater than 25 dB, quality factors up to 4700, and resonant frequencies up to 10 MHz are demonstrated along with a discussion of their advantages and disadvantages for use as MEMS resonators. Nonlinear resonator response is also investigated in relation to the onset of classic Duffing behavior, beam buckling and mode coupling. Fabrication techniques, operating conditions, and design rules are presented to minimize or eliminate nonlinear resonator response.

  19. A high-force, out-of-plane actuator with a MEMS-enabled microscissor motion amplifier

    NASA Astrophysics Data System (ADS)

    Xie, Xin; Livermore, Carol

    2015-12-01

    The design, fabrication, and demonstration of a set of 2 mm2, high-force actuators that combine piezoelectric in-plane actuators with MEMS-enabled scissor mechanisms (motion amplifiers) to simultaneously produce high out-of-plane forces and large out-of-plane displacements are presented. The microscissor motion amplifier employs two layers of lithographically-patterned SU-8 microstructure laminated with a thin film of structural polyimide and adhesive to form hinges. Performance is optimized by varying layer thickness and adhesive types. Measured displacements of >3 μm and measured forces of >5 mN are observed, corresponding to a displacement per unit area of 1.6 μm/mm2 and a force per unit area of 2.6 mN/mm2. Cyanoacrylate adhesive provides superior performance to silicone adhesive, with larger force output. Thicker polyimide hinges provide smaller displacement but greater force than thinner polyimide hinges. These powerful, compact actuators have significant potential for high-force applications like tactile displays and micropumps.

  20. Evolution of MEMS scanning mirrors for laser projection in compact consumer electronics

    NASA Astrophysics Data System (ADS)

    Tauscher, Jason; Davis, Wyatt O.; Brown, Dean; Ellis, Matt; Ma, Yunfei; Sherwood, Michael E.; Bowman, David; Helsel, Mark P.; Lee, Sung; Coy, John Wyatt

    2010-02-01

    The applicability of MOEMS scanning mirrors towards the creation of "flying spot" scanned laser displays is well established. The extension of this concept towards compact embedded pico-projectors has required an evolution of scanners and packaging to accommodate the needs of the consumer electronics space. This paper describes the progression of the biaxial MOEMS scanning mirrors developed by Microvision over recent years. Various aspects of the individual designs are compared. Early devices used a combination of magnetic quasistatic actuation and resonant electrostatic operation in an evacuated atmosphere to create a projection engine for retinal scanned displays. Subsequent designs realized the elimination of both the high voltage electrostatic drive and the vacuum package, and a simplification of the actuation scheme through proprietary technical advances. Additional advances have doubled the scan angle capability and greatly miniaturized the MOEMS component while not incurring significant increase in power consumption, making it an excellent fit for the consumer pico-projector application. The simplicity of the scanned laser-based pico-projector optical design enables high resolution and a large effective image size in a thin projection engine, all of which become critical both to the viability of the technology and adoption by consumers. Microvision's first scanned laser pico-projector is built around a MOEMS scanning mirror capable of projecting 16:9 aspect ratio, WVGA display within a 6.6 mm high package. Further evolution on this path promises continued improvement in resolution, size, and power.

  1. Handheld ultrahigh speed swept source optical coherence tomography instrument using a MEMS scanning mirror

    PubMed Central

    Lu, Chen D.; Kraus, Martin F.; Potsaid, Benjamin; Liu, Jonathan J.; Choi, WooJhon; Jayaraman, Vijaysekhar; Cable, Alex E.; Hornegger, Joachim; Duker, Jay S.; Fujimoto, James G.

    2013-01-01

    We developed an ultrahigh speed, handheld swept source optical coherence tomography (SS-OCT) ophthalmic instrument using a 2D MEMS mirror. A vertical cavity surface-emitting laser (VCSEL) operating at 1060 nm center wavelength yielded a 350 kHz axial scan rate and 10 µm axial resolution in tissue. The long coherence length of the VCSEL enabled a 3.08 mm imaging range with minimal sensitivity roll-off in tissue. Two different designs with identical optical components were tested to evaluate handheld OCT ergonomics. An iris camera aided in alignment of the OCT beam through the pupil and a manual fixation light selected the imaging region on the retina. Volumetric and high definition scans were obtained from 5 undilated normal subjects. Volumetric OCT data was acquired by scanning the 2.4 mm diameter 2D MEMS mirror sinusoidally in the fast direction and linearly in the orthogonal slow direction. A second volumetric sinusoidal scan was obtained in the orthogonal direction and the two volumes were processed with a software algorithm to generate a merged motion-corrected volume. Motion-corrected standard 6 x 6 mm2 and wide field 10 x 10 mm2 volumetric OCT data were generated using two volumetric scans, each obtained in 1.4 seconds. High definition 10 mm and 6 mm B-scans were obtained by averaging and registering 25 B-scans obtained over the same position in 0.57 seconds. One of the advantages of volumetric OCT data is the generation of en face OCT images with arbitrary cross sectional B-scans registered to fundus features. This technology should enable screening applications to identify early retinal disease, before irreversible vision impairment or loss occurs. Handheld OCT technology also promises to enable applications in a wide range of settings outside of the traditional ophthalmology or optometry clinics including pediatrics, intraoperative, primary care, developing countries, and military medicine. PMID:24466495

  2. Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures.

    PubMed

    Ma, Cheng-Wen; Lee, Fu-Wei; Liao, Hsin-Hung; Kuo, Wen-Cheng; Yang, Yao-Joe

    2015-08-28

    We propose an electrostatically-actuated microelectromechanical digital-to-analog converter (M-DAC) device with low actuation voltage. The spring structures of the silicon-based M-DAC device were monolithically fabricated using parylene-C. Because the Young's modulus of parylene-C is considerably lower than that of silicon, the electrostatic microactuators in the proposed device require much lower actuation voltages. The actuation voltage of the proposed M-DAC device is approximately 6 V, which is less than one half of the actuation voltages of a previously reported M-DAC equipped with electrostatic microactuators. The measured total displacement of the proposed three-bit M-DAC is nearly 504 nm, and the motion step is approximately 72 nm. Furthermore, we demonstrated that the M-DAC can be employed as a mirror platform with discrete displacement output for a noncontact surface profiling system.

  3. MEMS Actuators for Tuning Nanometer-scale Airgaps in Heterostructures and Optical Instrumentation for Glacier Ice Studies

    NASA Astrophysics Data System (ADS)

    Chan, Wing Shan

    MEMS Actuators for Tuning Nanometer-scale Airgaps in Heterostructures: We developed a new actuator microstructure to control the spacing between closely spaced surfaces. Creating and controlling nanometer gaps is of interest in areas such as plasmonics and quantum electronics. For example, energy states in quantum well heterostructures can be tuned by adjusting the physical coupling distance between wells. Unfortunately, such an application calls for active control of a nano-scale air gap between surfaces which are orders of magnitude larger, which is difficult due to stiction forces. A vertical electrostatic wedge actuator was designed to control the air gap between two closely spaced quantum wells in a collapsed cantilever structure. A six-mask fab- rication process was developed and carried out on an InGaAs/InP quantum well het- erostructure on an InP substrate. Upon actuation, the gap spacing between the surfaces was tuned over a maximum range of 55 nm from contact with an applied voltage of 60 V. Challenges in designing and fabricating the device are discussed. Optical Instrumentation for Glacier Ice Studies: We explored new optical instrumentation for glacier ice studies. Glacier ice, such as that of the Greenland and Antarctic ice sheets, is formed by the accumulation of snowfall over hundreds of thousands of years. Not all snowfalls are the same. Their isotopic compositions vary according to the planet's climate at the time, and may contain part of the past atmosphere. The physical properties and chemical content of the ice are therefore proxies of Earth's climate history. In this work, new optical methods and instrumentation based on light scattering and polarization were developed to more efficiently study glacier ice. Field deployments in Antarctica of said instrumentation and results acquired are presented.

  4. 5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application

    PubMed Central

    Ye, Liangchen; Zhang, Gaofei; You, Zheng

    2017-01-01

    The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS device that can scan laser beams across one or two dimensions. MEMS scanning mirrors can be applied in a variety of applications, such as laser display, bio-medical imaging and Light Detection and Ranging (LiDAR). These commercial applications have recently created a great demand for low-driving-voltage and low-power MEMS mirrors. However, no reported two-axis MEMS scanning mirror is available for usage in a universal supplying voltage such as 5 V. In this paper, we present an ultra-low voltage driven two-axis MEMS scanning mirror which is 5 V compatible. In order to realize low voltage and low power, a two-axis MEMS scanning mirror with mechanical leverage driven by PZT (Lead zirconate titanate) ceramic is designed, modeled, fabricated and characterized. To further decrease the power of the MEMS scanning mirror, a new method of impedance matching for PZT ceramic driven by a two-frequency mixed signal is established. As experimental results show, this MEMS scanning mirror reaches a two-axis scanning angle of 41.9° × 40.3° at a total driving voltage of 4.2 Vpp and total power of 16 mW. The effective diameter of reflection of the mirror is 2 mm and the operating frequencies of two-axis scanning are 947.51 Hz and 1464.66 Hz, respectively. PMID:28273880

  5. 5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application.

    PubMed

    Ye, Liangchen; Zhang, Gaofei; You, Zheng

    2017-03-05

    The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS device that can scan laser beams across one or two dimensions. MEMS scanning mirrors can be applied in a variety of applications, such as laser display, bio-medical imaging and Light Detection and Ranging (LiDAR). These commercial applications have recently created a great demand for low-driving-voltage and low-power MEMS mirrors. However, no reported two-axis MEMS scanning mirror is available for usage in a universal supplying voltage such as 5 V. In this paper, we present an ultra-low voltage driven two-axis MEMS scanning mirror which is 5 V compatible. In order to realize low voltage and low power, a two-axis MEMS scanning mirror with mechanical leverage driven by PZT (Lead zirconate titanate) ceramic is designed, modeled, fabricated and characterized. To further decrease the power of the MEMS scanning mirror, a new method of impedance matching for PZT ceramic driven by a two-frequency mixed signal is established. As experimental results show, this MEMS scanning mirror reaches a two-axis scanning angle of 41.9° × 40.3° at a total driving voltage of 4.2 Vpp and total power of 16 mW. The effective diameter of reflection of the mirror is 2 mm and the operating frequencies of two-axis scanning are 947.51 Hz and 1464.66 Hz, respectively.

  6. Fiber-optic raster scanning two-photon endomicroscope using a tubular piezoelectric actuator

    NASA Astrophysics Data System (ADS)

    Do, Dukho; Yoo, Hongki; Gweon, Dae-Gab

    2014-06-01

    A nonresonant, fiber-optic raster scanning endomicroscope was developed using a quarter-tubular piezoelectric (PZT) actuator. A fiber lever mechanism was utilized to enhance the small actuation range of the tubular PZT actuator and to increase its field-of-view. Finite element method simulation of the endoscopic probe was conducted for various conditions to maximize its scanning range. After fabricating the probe using a double clad fiber, we obtained two-photon fluorescence images using raster beam scanning of the fiber. The outer diameter of the probe was 3.5 mm and its rigid distal length was 30 mm including a high numerical aperture gradient index lens. These features are sufficient for input into the instrumental channel of a commercial colonoscope or gastroscope to obtain high resolution images in vivo.

  7. Correction of image distortions in endoscopic optical coherence tomography based on two-axis scanning MEMS mirrors

    PubMed Central

    Wang, Donglin; Liang, Peng; Samuelson, Sean; Jia, Hongzhi; Ma, Junshan; Xie, Huikai

    2013-01-01

    A two-axis scanning microelectromechanical (MEMS) mirror enables an optical coherence tomography (OCT) system to perform three-dimensional endoscopic imaging due to its fast scan speed and small size. However, the radial scan from the MEMS mirror causes various distortions in OCT images, namely spherical, fan-shaped and keystone distortions. In this paper, a new method is proposed to correct all of three distortions presented in OCT systems based on two-axis MEMS scanning mirrors. The spherical distortion is corrected first by directly manipulating the original spectral interferograms in the phase domain, followed by Fourier transform and three-dimensional geometrical transformation for correcting the other two types of distortions. OCT imaging experiments on a paper with square ink printed arrays and a glass tube filled with milk have been used to validate the proposed method. Distortions in OCT images of flat or curved surfaces can all be effectively removed. PMID:24156064

  8. Miniaturized multimodal CARS microscope based on MEMS scanning and a single laser source.

    PubMed

    Murugkar, Sangeeta; Smith, Brett; Srivastava, Prateek; Moica, Adrian; Naji, Majid; Brideau, Craig; Stys, Peter K; Anis, Hanan

    2010-11-08

    We demonstrate a novel miniaturized multimodal coherent anti-Stokes Raman scattering (CARS) microscope based on microelectromechanical systems (MEMS) scanning mirrors and custom miniature optics. A single Ti:sapphire femtosecond pulsed laser is used as the light source to produce the CARS, two photon excitation fluorescence (TPEF) and second harmonic generation (SHG) images using this miniaturized microscope. The high resolution and distortion-free images obtained from various samples such as a USAF target, fluorescent and polystyrene microspheres and biological tissue successfully demonstrate proof of concept, and pave the path towards future integration of parts into a handheld multimodal CARS probe for non- or minimally-invasive in vivo imaging.

  9. Design, fabrication, test, and evaluation of RF MEMS series switches using lead zirconate titanate (PZT) thin film actuators

    NASA Astrophysics Data System (ADS)

    Polcawich, Ronald G.

    The aim of this thesis was to design and prototype a robust, low voltage RF MEMS switch for use in military phased arrays. The frequencies of interest for this work include very low frequencies down to DC operation with the upper limit extending to at least 40 GHz. This broad frequency requirement requires a robust high frequency design and simulation using microwave transmission lines. With the aid of researchers at the US Army Research Laboratory, co-planar waveguide (CPW) transmission lines were chosen and designed to provide a low loss, 50 ohm impedance transmission line for the switch. CPW designs allow for both series and shunt switch configuration with this work focusing on a series switch. Furthermore, a series switch an ohmic contact was chosen as opposed to capacitive contacts. Piezoelectric actuation is chosen for the switch to enable operating voltages less than 10 volts while still maintaining a restoring force to prevent stiction. To meet these demands, lead zirconate titanate (PZT) thin films have been chosen for the piezoelectric actuator. Mechanical modeling of cantilevers comprised of an elastic layer and a Pt-PZT-Pt actuator were used to demonstrate feasibility of closing large gaps between switch contacts. Placement of the actuator to minimize perturbations to the RF transmission line is critical for broadband performance. Using fabrication design rules, electro-mechanical modeling, and high frequency design, the actuators were designed to fit with the RF gap between the RF conductor and ground planes of the CPW transmission line. Optimal performance was obtained with the actuators mechanically isolated from a majority of the RF transmission except for a small section that provides the contact pad to enable switch closure. The resulting switch is the first demonstrated first surface micromachined RF MEMS switch operating from DC to 65 GHz. This switch has a median actuation voltage below 5 volts with operation as low as 2 volts. Isolation in the

  10. Thermal MEMS actuator operation in aqueous media/seawater: Performance enhancement through atomic layer deposition post processing of PolyMUMPs devices

    SciTech Connect

    Warnat, Stephan Forbrigger, Cameron; Hubbard, Ted; Bertuch, Adam; Sundaram, Ganesh

    2015-01-15

    A method to enhance thermal microelectromechanical systems (MEMS) actuators in aqueous media by using dielectric encapsulation layers is presented. Aqueous media reduces the available mechanical energy of the thermal actuator through an electrical short between actuator structures. Al{sub 2}O{sub 3} and TiO{sub 2} laminates with various thicknesses were deposited on packaged PolyMUMPs devices to electrically separate the actuator from the aqueous media. Atomic layer deposition was used to form an encapsulation layer around released MEMS structures and the package. The enhancement was assessed by the increase of the elastic energy, which is proportional to the mechanical stiffness of the actuator and the displacement squared. The mechanical stiffness of the encapsulated actuators compared with the noncoated actuators was increased by factors ranging from 1.45 (for 45 nm Al{sub 2}O{sub 3} + 20 nm TiO{sub 2}) to 1.87 (for 90 nm Al{sub 2}O{sub 3} + 40 nm TiO{sub 2}). Displacement measurements were made for all laminate combinations in filtered tap water and seawater by using FFT based displacement measurement technique with a repeatability of ∼10 nm. For all laminate structures, the elastic energy increased and enhanced the actuator performance: In seawater, the mechanical output energy increased by factors ranging from 5 (for 90 nm Al{sub 2}O{sub 3}) to 11 (for 90 nm Al{sub 2}O{sub 3} + 40 nm TiO{sub 2}). The authors also measured the long-term actuator stability/reliability in seawater. Samples were stored for 29 days in seawater and tested for 17 days in seawater. Laminates with TiO{sub 2} layers allowed constant operation over the entire measurement period.

  11. High-speed MEMS swept-wavelength light source for FBG sensor system

    NASA Astrophysics Data System (ADS)

    Saitoh, Takanori; Nakamura, Kenichi; Takahashi, Yoshifumi; Miyagi, Koichiro

    2005-05-01

    A high-speed MEMS swept-wavelength light source (SLS) for an FBG sensor system is proposed and demonstrated. It is basically a multi-mode external-cavity laser diode (LD), and consists mainly of an LD head, diffraction grating, and electromagnetically actuated MEMS scanning mirror. It has a linewidth of 0.03 nm, scan range from 1508 to 1582 nm, scan rate of 0.57 ms and output power of 10 mW. The heart of the MEMS SLS is the MEMS scanning mirror (8 x 6 mm) that changes the oscillation wavelength continuously and rapidly. The scanning mirror is actuated by electromagnetic force derived from a permalloy piece glued on the back of the mirror and a C-shape electromagnet. The MEMS SLS allows construction of a low-cost, simple and high-speed FBG interrogator system.

  12. Novel On-wafer Radiation Pattern Measurement Technique for MEMS Actuator Based Reconfigurable Patch Antennas

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.

    2002-01-01

    The paper presents a novel on-wafer, antenna far field pattern measurement technique for microelectromechanical systems (MEMS) based reconfigurable patch antennas. The measurement technique significantly reduces the time and the cost associated with the characterization of printed antennas, fabricated on a semiconductor wafer or dielectric substrate. To measure the radiation patterns, the RF probe station is modified to accommodate an open-ended rectangular waveguide as the rotating linearly polarized sampling antenna. The open-ended waveguide is attached through a coaxial rotary joint to a Plexiglas(Trademark) arm and is driven along an arc by a stepper motor. Thus, the spinning open-ended waveguide can sample the relative field intensity of the patch as a function of the angle from bore sight. The experimental results include the measured linearly polarized and circularly polarized radiation patterns for MEMS-based frequency reconfigurable rectangular and polarization reconfigurable nearly square patch antennas, respectively.

  13. The design and simulation of single detector MIR spectrometer based on MEMS scanning mirror

    NASA Astrophysics Data System (ADS)

    Zhang, Zhong-wei; Wen, Zhi-yu; Zeng, Tian-ling; Wei, Kang-lin

    2011-08-01

    Infrared (IR) spectrometers are very important optical equipments that can be used in industry, science, medicine, agriculture, biology and food safety etc., and the market is growing. However, most traditional IR spectrometers, such as Fourier transform spectrometer (FTS) that based on Michelson interferometer principle and scanning monochromator that based on grating scanning, are expensive, relative large volume, and stationary, which can't meet the requirements of specific application such as rapidity, special environment and some special samples. To overcome these drawbacks, innovatory technology-micro electro mechanical systems (MEMS) technology was used in micro IR spectrometers in the past few years. And several prototypes and products that based on several operational principles have been emerged. In this paper, a novel IR micro spectrometer which based on MEMS technology and used single element detector was presented over a wide spectral range (from 2500nm to 5000nm) in the mid infrared (MIR) wavelength regime, and the optical system of it was designed on the basis of traditional scanning monochromator principle. In the optical system, there is a highlighted characteristic that dual spherical focus mirror was used to focus the diffraction light of the diffraction grating, which improved the spectral resolution of the optical system. Finally, using Zemax optical software, three torsion angle locations were selected to simulate the optical system of the spectrometer with the slit's size 0.1mm×1mm. The simulation result indicated that in the whole wavelength range the spectral resolution of the optical system was less than 30nm, and a high accuracy MIR spectrometer with compact volume will be realized in future hopefully.

  14. Feedback/feedforward control of hysteresis-compensated piezoelectric actuators for high-speed scanning applications

    NASA Astrophysics Data System (ADS)

    Liu, Yanfang; Shan, Jinjun; Gabbert, Ulrich

    2015-01-01

    This paper presents the control system design for a piezoelectric actuator (PEA) for a high-speed trajectory scanning application. First nonlinear hysteresis is compensated for by using the Maxwell resistive capacitor model. Then the linear dynamics of the hysteresis-compensated piezoelectric actuator are identified. A proportional plus integral (PI) controller is designed based on the linear system, enhanced by feedforward hysteresis compensation. It is found that the feedback controller does not always improve tracking accuracy. When the input frequency exceeds a certain value, feedforward control only may result in better control performance. Experiments are conducted, and the results demonstrate the effectiveness of the proposed control approach.

  15. Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

    NASA Astrophysics Data System (ADS)

    Heikkinen, V.; Hanhijärvi, K.; Aaltonen, J.; Grigoras, K.; Kassamakov, I.; Franssila, S.; Haeggström, E.

    2012-03-01

    Scanning White Light Interferometry (SWLI) provides high vertical precision for measuring step-like structures in microelectromechanical systems (MEMS). The SWLI performance depends on its light source. A rapidly modulated light source with a broad bandwidth inside the infrared (IR) region is necessary to measure layered MEMS that move. Typical SWLI light sources - light emitting diodes (LEDs) and Halogen (HG) bulbs - fulfill only one of these requirements. To overcome this shortcoming we equipped our SWLI setup with a supercontinuum (SC) light source produced by Fiberware Gmbh (Ilum 100 USB II). We tested our setup by measuring in plane and out of plane oscillating thermal bridges with visible light, as well as top and bottom surfaces of silicon structures using IR light. The wide SC spectrum creates localized interferograms. This allowed us to measure top and bottom surfaces of a thin (4 μm) bridge. The stroboscopically measured profiles of oscillating thermal bridges were comparable to those measured using a white LED. The results of static measurements were similar to those achieved with an HG lamp.

  16. Comparison of Control Algorithms for a MEMS-based Adaptive Optics Scanning Laser Ophthalmoscope

    PubMed Central

    Li, Kaccie Y.; Mishra, Sandipan; Tiruveedhula, Pavan; Roorda, Austin

    2010-01-01

    We compared four algorithms for controlling a MEMS deformable mirror of an adaptive optics (AO) scanning laser ophthalmoscope. Interferometer measurements of the static nonlinear response of the deformable mirror were used to form an equivalent linear model of the AO system so that the classic integrator plus wavefront reconstructor type controller can be implemented. The algorithms differ only in the design of the wavefront reconstructor. The comparisons were made for two eyes (two individuals) via a series of imaging sessions. All four controllers performed similarly according to estimated residual wavefront error not reflecting the actual image quality observed. A metric based on mean image intensity did consistently reflect the qualitative observations of retinal image quality. Based on this metric, the controller most effective for suppressing the least significant modes of the deformable mirror performed the best. PMID:20454552

  17. Kilohertz scanning all-fiber optical delay line using piezoelectric actuation

    NASA Astrophysics Data System (ADS)

    Henderson, David A.; Hoffman, Conrad; Culhane, Robert; Viggiano, Dan, III

    2004-12-01

    Commercial applications for fiber sensing and low-coherence interferometry are rapidly growing in medical, industrial and aerospace markets. These new instruments must be smaller, more robust and less expensive. An all-fiber optical delay line or "fiber stretcher", using piezoelectric (PZT) actuation, offers a simple solid-state solution that eliminates free space optics. The challenges for PZT fiber stretchers include: reducing non-linearity and hysteresis, achieving sufficient scan range with minimum fiber length, maximizing scan frequency and reducing losses in the drive electronics. PZT actuators are essentially large ceramic capacitors that must be rapidly charged and discharged to achieve fast scanning. The mechanical response of the PZT ceramic is greater than 10 kHz which makes it practical to scan at four kilohertz. A thin-walled piezoelectric disk or cylinder achieves 4.5 millimeters of fiber stretch using 20 meters of coiled fiber. Digitally controlled series resonant electronics produce a 1200 volt sinusoidal drive signal at a fixed frequency of four kilohertz while dissipating only 16 Watts. An all-fiber optical delay line module, using piezoelectric actuators and a series resonant drive, is a miniature, robust and efficient alternative to free-space optics with dithering mirrors or spinning polygons.

  18. Design of a MEMS-based retina scanning system for biometric authentication

    NASA Astrophysics Data System (ADS)

    Woittennek, Franziska; Knobbe, Jens; Pügner, Tino; Schelinski, Uwe; Grüger, Heinrich

    2014-05-01

    There is an increasing need for reliable authentication for a number of applications such as e commerce. Common authentication methods based on ownership (ID card) or knowledge factors (password, PIN) are often prone to manipulations and may therefore be not safe enough. Various inherence factor based methods like fingerprint, retinal pattern or voice identifications are considered more secure. Retina scanning in particular offers both low false rejection rate (FRR) and low false acceptance rate (FAR) with about one in a million. Images of the retina with its characteristic pattern of blood vessels can be made with either a fundus camera or laser scanning methods. The present work describes the optical design of a new compact retina laser scanner which is based on MEMS (Micro Electric Mechanical System) technology. The use of a dual axis micro scanning mirror for laser beam deflection enables a more compact and robust design compared to classical systems. The scanner exhibits a full field of view of 10° which corresponds to an area of 4 mm2 on the retinal surface surrounding the optical disc. The system works in the near infrared and is designed for use under ambient light conditions, which implies a pupil diameter of 1.5 mm. Furthermore it features a long eye relief of 30 mm so that it can be conveniently used by persons wearing glasses. The optical design requirements and the optical performance are discussed in terms of spot diagrams and ray fan plots.

  19. Modeling, fabrication and testing of MEMS tunable inductors varied with piezoelectric actuators

    NASA Astrophysics Data System (ADS)

    Bedair, S. S.; Pulskamp, J. S.; Meyer, C. D.; Polcawich, R. G.; Kierzewski, I. M.

    2014-09-01

    Modeling, fabrication and measurements of tunable inductors are presented where inductance tuning is achieved through mechanical displacement, by piezoelectric actuation, of mutually-coupled coils. The modified Greenhouse method is utilized as a modeling tool to predict the inductance variations as a function of both translation and angular displacement, where coils and traces which are arbitrarily oriented with respect to one another are considered. The use of this modeling approach is verified through experimental results where electrical measurements of inductances are compared with the modeled inductances. The inductance model compares well with the measurements and within 10% of the measured inductance with a 3% mean error. In addition, the impact of the interconnect widths on tunable inductor performances is assessed for both negatively and positively coupled tunable inductor cases, where devices with interconnect widths ranging between 10 and 40 µm are considered. Tuning ratios as high as ~3.9:1 were measured for the negatively-coupled coil designs with 18 V actuation; this corresponds to minimum and maximum quality factors of 5.72 (at 4.05 GHz with a 2.80 nH inductance) and 14.91 (at 2.25 GHz with 10.86 nH inductance), respectively. For the positively coupled inductors, tuning ratios of ~1.2:1 resulted with inductance and peak quality factors of 7.70 nH and ~18 (3.69 GHz), respectively. With 18 V actuation, these values tune to 6.57 nH with a Q ~18 (4.46 GHz). Residual poling stress was found to limit the practical tuning ratio to ~1.8:1 for the negatively coupled coils.

  20. Development of a MEMS-rate sensor with PZT actuation and sensing

    NASA Astrophysics Data System (ADS)

    Royle, Christopher M.; Fox, Colin H.

    2002-07-01

    This paper relates to the development of a novel rate sensor for a wide range of potential applications in the automotive field, amongst others. The sensor is based on the dynamic behavior of an active, vibrating silicon structure that uses thin-film piezoelectric material for actuation and sensing functions, and can be manufactured using silicon micro-machining techniques. The use of piezo-electric material for drive and pickoff offers potentially significant advantages over electrostatic/capacitive means in terms of achievable actuation forces and simplicity of structural design. This paper gives an overview of the design and analysis of a prototype sensor. The design concept is described and a low-order mathematical model, incorporating the inertial behavior of the structure and the interaction between the silicon structure and the piezo-drives and pickoffs is presented. This model allows the basic sensitivity of the sensor to be quantified. The design of a prototype sensor is then described. Some preliminary test results are presented, illustrating the feasibility of the concept.

  1. Finite Element Analysis of the Vertical Levitation Force in an Electrostatic MEMS Comb Drive Actuator

    NASA Astrophysics Data System (ADS)

    Wooldridge, J.; Blackburn, J.; Muniz-Piniella, A.; Stewart, M.; Shean, T. A. V.; Weaver, P. M.; Cain, M. G.

    2013-11-01

    A vertical levitation electrostatic comb drive actuator was manufactured for the purpose of measuring piezoelectric coefficients in small-scale materials and devices. Previous modelling work on comb drive levitation has focussed on control of the levitation in standard poly-silicon devices in order to minimize effects on lateral modes of operation required for the accelerometer and gyroscope applications. The actuator developed in this study was manufactured using a 20 μm electroplated Ni process with a 25 μm trench created beneath the released structure through chemical wet etching. A finite element analysis using ZINC was used to model electrostatic potential around a cross section of one static and one movable electrode, from which the net levitation force per unit electrode was calculated. The model was first verified using the electrode geometry from previously studied systems, and then used to study the variation of force as a function of decreasing substrate-electrode distance. With the top electrode surfaces collinear the calculated force density is 0.00651 epsilon0V2Mμm-1, equivalent to a total force for the device of 36.4 μN at an applied voltage of VM=100 V, just 16% larger than the observed value. The measured increase in force with distance was smaller than predicted with the FEA, due to the geometry of the device in which the electrodes at the anchored ends of the supporting spring structure displace by a smaller amount than those at the centre.

  2. Microelectromechanical Systems (MEMS) Actuator-Based, Polarization Reconfigurable Patch Antenna Demonstrated

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.

    2002-01-01

    A nearly square patch antenna with a contact actuator along a radiating edge for polarization reconfiguration was demonstrated at Ka-band frequencies at the NASA Glenn Research Center. The layout of the antenna is shown in the following sketch. This antenna has the following advantages: 1) It can be dynamically reconfigured to receive and transmit a linearly polarized signal or a circularly polarized signal. This feature allows the substitution of multiple antennas on a satellite by a single antenna, thereby resulting in significant cost savings. 2) In our approach, the polarization is switched between the two states without affecting the frequency of operation; thus, valuable frequency spectrum is conserved. 3) The ability to switch polarization also helps mitigate propagation effects due to adverse weather on the performance of a satellite-to-ground link. Hence, polarization reconfigurability enhances link reliability.

  3. Experimental methods of actuation, characterization and prototyping of hydrogels for bioMEMS/NEMS applications.

    PubMed

    Khaleque, T; Abu-Salih, S; Saunders, J R; Moussa, W

    2011-03-01

    As a member of the smart polymer material group, stimuli responsive hydrogels have achieved a wide range of applications in microfluidic devices, micro/nano bio and environmental sensors, biomechanics and drug delivery systems. To optimize the utilization of a hydrogel in various micro and nano applications it is essential to have a better understanding of its mechanical and electrical properties. This paper presents a review of the different techniques used to determine a hydrogel's mechanical properties, including tensile strength, compressive strength and shear modulus and the electrical properties including electrical conductivity and dielectric permittivity. Also explored the effect of various prototyping factors and the mechanisms by which these factors are used to alter the mechanical and electrical properties of a hydrogel. Finally, this review discusses a wide range of hydrogel fabrication techniques and methods used, to date, to actuate this family of smart polymer material.

  4. Pre-stressed piezoelectric bimorph micro-actuators based on machined 40 µm PZT thick films: batch scale fabrication and integration with MEMS

    NASA Astrophysics Data System (ADS)

    Wilson, S. A.; Jourdain, R. P.; Owens, S.

    2010-09-01

    The projected force-displacement capability of piezoelectric ceramic films in the 20-50 µm thickness range suggests that they are well suited to many micro-fluidic and micro-pneumatic applications. Furthermore when they are configured as bending actuators and operated at ~ 1 V µm - 1 they do not necessarily conform to the high-voltage, very low-displacement piezoelectric stereotype. Even so they are rarely found today in commercial micro-electromechanical devices, such as micro-pumps and micro-valves, and the main barriers to making them much more widely available would appear to be processing incompatibilities rather than commercial desirability. In particular, the issues associated with integration of these devices into MEMS at the production level are highly significant and they have perhaps received less attention in the mainstream than they deserve. This paper describes a fabrication route based on ultra-precision ceramic machining and full-wafer bonding for cost-effective batch scale production of thick film PZT bimorph micro-actuators and their integration with MEMS. The resulting actuators are pre-stressed (ceramic in compression) which gives them added performance, they are true bimorphs with bi-directional capability and they exhibit full bulk piezoelectric ceramic properties. The devices are designed to integrate with ancillary systems components using transfer-bonding techniques. The work forms part of the European Framework 6 Project 'Q2M—Quality to Micro'.

  5. Elastomeric photo-actuators and their investigation by confocal laser scanning microscopy

    NASA Astrophysics Data System (ADS)

    Czaniková, Klaudia; Ilčíková, Markéta; Krupa, Igor; Mičušík, Matej; Kasák, Peter; Pavlova, Ewa; Mosnáček, Jaroslav; Chorvát, Dušan, Jr.; Omastová, Mária

    2013-10-01

    The photo-actuation behavior of nanocomposites based on ethylene-vinylacetate copolymer (EVA) and styrene-isoprene-styrene (SIS) block copolymer filled with well-dispersed and modified multiwalled carbon nanotubes (MWCNTs) is discussed in this paper. The nanocomposites were prepared by casting from solution. To improve the dispersion of the MWCNTs in EVA, the MWCNT surface was modified with a non-covalent surfactant, cholesteryl 1-pyrenecarboxylate (PyChol). To prepare SIS nanocomposites, the MWCNT surface was covalently modified with polystyrene chains. The good dispersion of the filler was confirmed by transmission electron microscopy (TEM). Special, custom-made punch/die molds were used to create a Braille element (BE)-like shape, which under shear forces induces a uniaxial orientation of the MWCNTs within the matrix. The uniaxial orientation of MWCNTs is an essential precondition to ensure the photo-actuating behavior of MWCNTs in polymeric matrices. The orientation of the MWCNTs within the matrices was examined by scanning electron microscopy (SEM). Nanocomposite BEs were illuminated from the bottom by a red light-emitting diode (LED), and the photo-actuation was investigated by confocal laser scanning microscopy (CLSM). When the BEs were exposed to light, a temporary increase in the height of the element was detected. This process was observed to be reversible: after switching off the light, the BEs returned to their original shape and height.

  6. Modeling and simulation of blazed grating based on MEMS scanning micro-mirror for NIR micro-spectrometer

    NASA Astrophysics Data System (ADS)

    Zhou, Ying; Wen, Zhiyu; Yang, Tingyan; Lei, Hongjie

    2015-11-01

    Near infrared micro-spectrometer (NIRMS) as a vital detection equipment for various elements has been investigated over the last few years. Traditional MEMS NIRMS employs CCD array detectors for NIR spectrum collection and this leads to higher fabrication cost. In this paper, to ensure the higher diffraction efficiency as well as lower fabrication cost, a novel blazed grating based on MEMS scanning micro-mirror (SMM) is proposed. By our design method, the NIRMS needs only one single InGaAs detector photo diode to collect NIR spectrum and ensure the high diffraction efficiency. Our results show that the diffraction efficiency of the blazed grating is almost 50% and the peak value reaches to 90% in the range of 900-2,100 nm while the optical scanning angle is 14.2°.

  7. SOI-CMOS-MEMS electrothermal micromirror arrays

    NASA Astrophysics Data System (ADS)

    Gilgunn, Peter J.

    A fabrication technology called SOI-CMOS-MEMS is developed to realize arrays of electrothermally actuated micromirror arrays with fill factors up to 90% and mechanical scan ranges up to +/-45°. SOI-CMOS-MEMS features bonding of a CMOS-MEMS folded electrothermal actuator chip with a SOI mirror chip. Actuators and micromirrors are separately released using Bosch-type and isotropic Si etch processes. A 1-D, 3 x 3 SOI-CMOS-MEMS mirror array is characterized at a 1 mm scale that meets fill factor and scan range targets with a power sensitivity of 1.9 deg·m W-1 and -0.9 deg·m W-1 on inner and outer actuator legs, respectively. Issues preventing fabrication of SOI-CMOS-MEMS micromirror arrays designed for 1-D and 3-D motion at scales from 500 microm to 50 microm are discussed. Electrothermomechanical analytic models of power response of a generic folded actuator topology are developed that provide insight into the trends in actuator behavior for actuator design elements such as beam geometry and heater type, among others. Adverse power and scan range scaling and favorable speed scaling are demonstrated. Mechanical constraints on device geometry are derived. Detailed material, process, test structure and device characterization is presented that demonstrates the consistency of measured device behavior with analytic models. A unified model for aspect ratio dependent etch modulation is developed that achieves depth prediction accuracy of better than 10% up to 160 microm depth over a range of feature shapes and dimensions. The technique is applied extensively in the SOI-CMOS-MEMS process to produce deep multi-level structures in Si with a single etch mask and to control uniformity and feature profiles. TiW attack during release etch is shown to be the driving factor in mirror coplanarity loss. The effect is due to thermally accelerated etching caused by heating of released structures by the exothermic reaction of Si and F. The effect is quantified using in situ infrared

  8. Q-factor enhancement for self-actuated self-sensing piezoelectric MEMS resonators applying a lock-in driven feedback loop

    NASA Astrophysics Data System (ADS)

    Kucera, M.; Manzaneque, T.; Sánchez-Rojas, J. L.; Bittner, A.; Schmid, U.

    2013-08-01

    This paper presents a robust Q-control approach based on an all-electrical feedback loop enhancing the quality factor of a resonant microstructure by using the self-sensing capability of a piezoelectric thin film actuator made of aluminium nitride. A lock-in amplifier is used to extract the feedback signal which is proportional to the piezoelectric current. The measured real part is used to replace the originally low-quality and noisy feedback signal to modulate the driving voltage of the piezoelectric thin-film actuator. Since the lock-in amplifier reduces the noise in the feedback signal substantially, the proposed enhancement loop avoids the disadvantage of a constant signal-to-noise ratio, which an analogue feedback circuit usually suffers from. The quality factor was increased from the intrinsic value of 1766 to a maximum of 34 840 in air. These promising results facilitate precise measurements for self-actuated and self-sensing MEMS cantilevers even when operated in static viscous media.

  9. Integrated electrostatic micro-sensors for the development of modeling techniques of defects in the actuation of large micro-electromechanical systems (MEMS)

    NASA Astrophysics Data System (ADS)

    Reissman, Timothy; Garcia, Ephrahim; Lobontiu, Nicolae; Nam, Yoonsu

    2006-03-01

    A micro-electromechanical system (MEMS) was designed by following the saggital principle of motion amplification about an output direction which is perpendicular to the input direction. Several displacement-amplification microdevices have been fabricated by means of the PolyMUMPS microtechnology. The experimental testing of these electrostatically-actuated, electrostatically-sensed micromechanisms monitored the output motion by means of a highly-compliant, integrated cantilever, as well as by a vernier system, and revealed that the performance is less than predicted, in some occasions the errors between the defect-free model predictions and the experimental results being quite substantial. This system integration, sensory monitored discrepancy lead the effort of identifying and quantifying the influence of various factors in the less-than-expected response of these compliant micromechanisms. Discussed are the effect of non-parallel disposition of the mobile structure with respect to its substrate, the non-planar shape of the microdevice, which produces at times rubbing or adhesion against the substrate, various misalignments between fixed and mobile components, as well the resulting fringe effects, which sizably hamper the operation of the comb or plate electrostatic sensory actuation. It is demonstrated that by combining all these unwanted effects, which are either inherent to the small-dimensions microdevice, or are simply errors of the microfabrication process, it is possible to account for the experimentally-observed response and create a predictive error-inclusive model of the system.

  10. Fiber-optic rotation of micro-scale structures enabled microfluidic actuation and self-scanning two-photon excitation

    NASA Astrophysics Data System (ADS)

    Black, Bryan J.; Luo, Dijun; Mohanty, Samarendra K.

    2012-11-01

    Here, we report non-restricted, controlled fiber optic rotation of micro-motor, in counter-propagating fiber-optic beams having transverse-offset, for actuation of microfluidic flow. Ray-optics based simulations of the torque (and angular velocity) were conducted for different fiber transverse-offsets in order to determine optimal geometry for effective actuation. Further, self-scanning two-photon excitation of the fiber-optically rotated microscopic object is achieved by use of an ultrafast laser beam in one of the fiber arm.

  11. High-stroke silicon-on-insulator MEMS nanopositioner: Control design for non-raster scan atomic force microscopy

    SciTech Connect

    Maroufi, Mohammad Fowler, Anthony G. Bazaei, Ali Moheimani, S. O. Reza

    2015-02-15

    A 2-degree of freedom microelectromechanical systems nanopositioner designed for on-chip atomic force microscopy (AFM) is presented. The device is fabricated using a silicon-on-insulator-based process and is designed as a parallel kinematic mechanism. It contains a central scan table and two sets of electrostatic comb actuators along each orthogonal axis, which provides displacement ranges greater than ±10 μm. The first in-plane resonance modes are located at 1274 Hz and 1286 Hz for the X and Y axes, respectively. To measure lateral displacements of the stage, electrothermal position sensors are incorporated in the design. To facilitate high-speed scans, the highly resonant dynamics of the system are controlled using damping loops in conjunction with internal model controllers that enable accurate tracking of fast sinusoidal set-points. To cancel the effect of sensor drift on controlled displacements, washout controllers are used in the damping loops. The feedback controlled nanopositioner is successfully used to perform several AFM scans in contact mode via a Lissajous scan method with a large scan area of 20 μm × 20 μm. The maximum scan rate demonstrated is 1 kHz.

  12. Integration and demonstration of MEMS-scanned LADAR for robotic navigation

    NASA Astrophysics Data System (ADS)

    Stann, Barry L.; Dammann, John F.; Del Giorno, Mark; DiBerardino, Charles; Giza, Mark M.; Powers, Michael A.; Uzunovic, Nenad

    2014-06-01

    LADAR is among the pre-eminent sensor modalities for autonomous vehicle navigation. Size, weight, power and cost constraints impose significant practical limitations on perception systems intended for small ground robots. In recent years, the Army Research Laboratory (ARL) developed a LADAR architecture based on a MEMS mirror scanner that fundamentally improves the trade-offs between these limitations and sensor capability. We describe how the characteristics of a highly developed prototype correspond to and satisfy the requirements of autonomous navigation and the experimental scenarios of the ARL Robotics Collaborative Technology Alliance (RCTA) program. In particular, the long maximum and short minimum range capability of the ARL MEMS LADAR makes it remarkably suitable for a wide variety of scenarios from building mapping to the manipulation of objects at close range, including dexterous manipulation with robotic arms. A prototype system was applied to a small (approximately 50 kg) unmanned robotic vehicle as the primary mobility perception sensor. We present the results of a field test where the perception information supplied by the LADAR system successfully accomplished the experimental objectives of an Integrated Research Assessment (IRA).

  13. Micromachined permanent magnets and their MEMS applications

    NASA Astrophysics Data System (ADS)

    Cho, Hyoung Jin

    2002-01-01

    In this research, new micromachined permanent magnets have been proposed, developed and characterized for MEMS applications. In realizing micromachined permanent magnets, a new electroplating technique using external magnetic field and a bumper filling technique using a photolithographically defined mold with resin bonded magnetic particles have been developed. The newly developed micromachining techniques allow thick film-type permanent magnet components to be integrated to magnetic MEMS devices with dimensional control and alignment. Permanent magnet arrays with the dimensions ranging from 30 mum to 200 mum have been developed with an energy density up to 2.7 kJ/m3 in precisely defined forms in the micro scale. For the applications of the permanent magnets developed in this work, three novel magnetic MEMS devices such as a bi-directional magnetic actuator, a magnetically driven optical scanner, and a magnetic cell separator have been successfully realized. After design and modeling, each device has been fabricated and fully characterized. The bi-directional actuator with the electroplated permanent magnet array has achieved bi-directional motion clearly and shown good agreement with the analytical and simulated models. The optical scanner has shown linear bi-directional response under static actuation and stable bi-directional scanning performance under dynamic actuation. As a potential BioMEMS application of the developed permanent magnet, the prototype magnetic cell separator using the electroplated permanent magnet strip array has been proposed and demonstrated for magnetic bead patterning. In conclusion, new thick film-type, electroplated CoNiMnP and epoxy resin bonded Sr-ferrite permanent magnets have been developed and characterized, and then, three new magnetic MEMS devices using the permanent magnets such as a bi-directional magnetic actuator, an optical scanner and a magnetic cell separator have been realized in this research. The new micromachined

  14. Optical MEMS-based arrays

    NASA Astrophysics Data System (ADS)

    Ruffin, Paul B.

    2003-07-01

    Industrial Micro Electro Mechanical Systems (MEMS) developers are rapidly bringing to demonstration inertial radio frequency, and optical MEMS devices and components. The Army has a requirement for compact, highly reliable, and inexpensive laser beam steering components for missile seekers and unmanned aerial vehicles remote sensing components to provide a fast scanning capability for pointing, acquisition, tracking, and data communication. The coupling of this requirement with recent developments in the micro-optics area, has led scientists and engineers at the Army Aviation and Missile Command (AMCOM) to consider optical MEMS-based phased arrays, which have potential applications in the commercial industry as well as in the military, as a replacement for gimbals. Laser beam steering in commercial applications such as free space communicataion, scanning display, bar-code reading, and gimbaled seekers; require relatively large monolithic micro-mirrors to accomplish the required optical resolution. The Army will benefit from phased arrays composed of relatively small micro-mirrors that can be actuated through large deflection angles with substantially reduced volume times. The AMCOM Aviation and Missile Research, Development, and Engineering Center (AMRDEC) has initiated a research project to develop MEMS-based phased arrays for use in a small volume, inexpensive Laser Detection and Ranging (LADAR) seeker that is particularly attractive because of its ability to provide large field-of-regard and autonomous target acquisition for reconnaissance mission applications. The primary objective of the collaborative project with the Defence Advanced Research Projects Agency (DARPA) is to develop a rugged, MEMS-based phased arrays for incorporation into the 2-D scanner of a LADAR seeker. Design challenges and approach to achieving performance requirements will be discussed.

  15. MEMS in microfluidic channels.

    SciTech Connect

    Ashby, Carol Iris Hill; Okandan, Murat; Michalske, Terry A.; Sounart, Thomas L.; Matzke, Carolyn M.

    2004-03-01

    Microelectromechanical systems (MEMS) comprise a new class of devices that include various forms of sensors and actuators. Recent studies have shown that microscale cantilever structures are able to detect a wide range of chemicals, biomolecules or even single bacterial cells. In this approach, cantilever deflection replaces optical fluorescence detection thereby eliminating complex chemical tagging steps that are difficult to achieve with chip-based architectures. A key challenge to utilizing this new detection scheme is the incorporation of functionalized MEMS structures within complex microfluidic channel architectures. The ability to accomplish this integration is currently limited by the processing approaches used to seal lids on pre-etched microfluidic channels. This report describes Sandia's first construction of MEMS instrumented microfluidic chips, which were fabricated by combining our leading capabilities in MEMS processing with our low-temperature photolithographic method for fabricating microfluidic channels. We have explored in-situ cantilevers and other similar passive MEMS devices as a new approach to directly sense fluid transport, and have successfully monitored local flow rates and viscosities within microfluidic channels. Actuated MEMS structures have also been incorporated into microfluidic channels, and the electrical requirements for actuation in liquids have been quantified with an elegant theory. Electrostatic actuation in water has been accomplished, and a novel technique for monitoring local electrical conductivities has been invented.

  16. MEMS-based handheld scanning probe with pre-shaped input signals for distortion-free images in Gabor-domain optical coherence microscopy.

    PubMed

    Cogliati, Andrea; Canavesi, Cristina; Hayes, Adam; Tankam, Patrice; Duma, Virgil-Florin; Santhanam, Anand; Thompson, Kevin P; Rolland, Jannick P

    2016-06-13

    High-speed scanning in optical coherence tomography (OCT) often comes with either compromises in image quality, the requirement for post-processing of the acquired images, or both. We report on distortion-free OCT volumetric imaging with a dual-axis micro-electro-mechanical system (MEMS)-based handheld imaging probe. In the context of an imaging probe with optics located between the 2D MEMS and the sample, we report in this paper on how pre-shaped open-loop input signals with tailored non-linear parts were implemented in a custom control board and, unlike the sinusoidal signals typically used for MEMS, achieved real-time distortion-free imaging without post-processing. The MEMS mirror was integrated into a compact, lightweight handheld probe. The MEMS scanner achieved a 12-fold reduction in volume and 17-fold reduction in weight over a previous dual-mirror galvanometer-based scanner. Distortion-free imaging with no post-processing with a Gabor-domain optical coherence microscope (GD-OCM) with 2 μm axial and lateral resolutions over a field of view of 1 × 1 mm2 is demonstrated experimentally through volumetric images of a regular microscopic structure, an excised human cornea, and in vivo human skin.

  17. Fast 3D in vivo swept-source optical coherence tomography using a two-axis MEMS scanning micromirror

    NASA Astrophysics Data System (ADS)

    Kumar, Karthik; Condit, Jonathan C.; McElroy, Austin; Kemp, Nate J.; Hoshino, Kazunori; Milner, Thomas E.; Zhang, Xiaojing

    2008-04-01

    We report on a fibre-based forward-imaging swept-source optical coherence tomography system using a high-reflectivity two-axis microelectromechanical scanning mirror for high-speed 3D in vivo visualization of cellular-scale architecture of biological specimens. The scanning micromirrors, based on electrostatic staggered vertical comb drive actuators, can provide ± 9° of optical deflection on both rotation axes and uniform reflectivity of greater than 90% over the range of imaging wavelengths (1260-1360 nm), allowing for imaging turbid samples with good signal-to-noise ratio. The wavelength-swept laser, scanning over 100 nm spectrum at 20 kHz rate, enables fast image acquisition at 10.2 million voxels s-1 (for 3D imaging) or 40 frames s-1 (for 2D imaging with 500 transverse pixels per image) with 8.6 µm axial resolution. Lateral resolution of 12.5 µm over 3 mm field of view in each lateral direction is obtained using ZEMAX optical simulations for the lateral beam scanning system across the scanning angle range of the 500 µm × 700 µm micromirror. We successfully acquired en face and tomographic images of rigid structures (scanning micromirror), in vitro biological samples (onion peels and pickle slices) and in vivo images of human epidermis over 2 × 1 × 4 mm3 imaging volume in real time at faster-than-video 2D frame rates. The results indicate that our system framework may be suitable for image-guided minimally invasive examination of various diseased tissues.

  18. Design and Development of an Optical Path Difference Scan Mechanism for Fourier Transform Spectrometers using High Displacement RAINBOW Actuators

    NASA Technical Reports Server (NTRS)

    Wise, Stephanie A.; Hardy, Robin C.; Dausch, David E.

    1997-01-01

    A new piezoelectric drive mechanism has been developed for optical translation in space-based spectrometer systems. The mechanism utilizes a stack of RAINBOW high displacement piezoelectric actuators to move optical components weighing less than 250 grams through a one centimeter travel. The mechanism uses the direct motion of the piezoelectric devices, stacked such that the displacement of the individual RAINBOW actuators is additive. A prototype device has been built which utilizes 21 RAINBOWs to accomplish the necessary travel. The mechanism weighs approximately 0.6 kilograms and uses less than 2 Watts of power at a scanning frequency of 0.5 Hertz, significantly less power than that required by state-of-the-art motor systems.

  19. Modeling and optimization of a novel two-axis mirror-scanning mechanism driven by piezoelectric actuators

    NASA Astrophysics Data System (ADS)

    Jing, Zijian; Xu, Minglong; Feng, Bo

    2015-02-01

    Mirror-scanning mechanisms are a key component in optical systems for diverse applications. However, the applications of existing piezoelectric scanners are limited due to their small angular travels. To overcome this problem, a novel two-axis mirror-scanning mechanism, which consists of a two-axis tip-tilt flexure mechanism and a set of piezoelectric actuators, is proposed in this paper. The focus of this research is on the design, theoretical modeling, and optimization of the piezoelectric-driven mechanism, with the goal of achieving large angular travels in a compact size. The design of the two-axis tip-tilt flexure mechanism is based on two nonuniform beams, which translate the limited linear output displacements of the piezoelectric actuators into large output angles. To exactly predict the angular travels, we built a voltage-angle model that characterizes the relationship between the input voltages to the piezoelectric actuators and the output angles of the piezoelectric-driven mechanism. Using this analytical model, the optimization is performed to improve the angular travels. A prototype of the mirror-scanning mechanism is fabricated based on the optimization results, and experiments are implemented to test the two-axis output angles. The experimental result shows that the angular travels of the scanner achieve more than 50 mrad, and the error between the analytical model and the experiment is about 11%. This error is much smaller than the error for the model built using the previous method because the influence of the stiffness of the mechanical structure on the deformation of the piezoelectric stack is considered in the voltage-angle model.

  20. MEMS scanner mirror based system for retina scanning and in eye projection

    NASA Astrophysics Data System (ADS)

    Woittennek, Franziska; Knobbe, Jens; Pügner, Tino; Dallmann, Hans-Georg; Schelinski, Uwe; Grüger, Heinrich

    2015-02-01

    Many applications could benefit from miniaturized systems to scan blood vessels behind the retina in the human eye, so called "retina scanning". This reaches from access control to sophisticated security applications and medical devices. High volume systems for consumer applications require low cost and a user friendly operation. For example this includes no need for removal of glasses and self-adjustment, in turn guidance of focus and point of attraction by simultaneous projection for the user. A new system has been designed based on the well-known resonantly driven 2-d scanner mirror of Fraunhofer IPMS. A combined NIR and VIS laser system illuminates the eye through an eye piece designed for an operating distance allowing the use of glasses and granting sufficient field of view. This usability feature was considered to be more important than highest miniaturization. The modulated VIS laser facilitates the projection of an image directly onto the retina. The backscattered light from the continuous NIR laser contains the information of the blood vessels and is detected by a highly sensitive photo diode. A demonstrational setup has been realized including readout and driving electronics. The laser power was adjusted to an eye-secure level. Additional security features were integrated. Test measurements revealed promising results. In a first demonstration application the detection of biometric pattern of the blood vessels was evaluated for issues authentication in.

  1. The Mariner Mark II high precision scan actuator - Results of an options trade study covering pointing performance and system-wide impacts

    NASA Technical Reports Server (NTRS)

    Schier, J. Alan; Bell, Charles E.; Agronin, Michael; Socha, Michael

    1988-01-01

    Four actuators considered as candidates to meet the requirements of the Mariner Mark II high-precision scan platform are evaluated with respect to such criteria as the net effect on spacecraft mass, required power, cost, expected pointing performance, operational considerations, and necessary control complexity. A direct drive actuator is found to be the most suitable candidate. It is noted that for missions where reactionless actuation results in a lower spacecraft mass due to propellant savings, the option of using a platform mounted or spacecraft mounted reaction wheel for platform momentum compensation and spacecraft attitude control is attractive.

  2. Development of a Compact Optical-MEMS Scanner with Integrated VCSEL Light Source and Diffractive Optics

    SciTech Connect

    Krygowski, Thomas W.; Reyes, David; Rodgers, M. Steven; Smith, James H.; Warren, Mial; Sweatt, William; Blum-Spahn, Olga; Wendt, Joel R.; Asbill, Randy

    1999-06-30

    In this work the design and initial fabrication results are reported for the components of a compact optical-MEMS laser scanning system. This system integrates a silicon MEMS laser scanner, a Vertical Cavity Surface Emitting Laser (VCSEL) and passive optical components. The MEMS scanner and VCSEL are mounted onto a fused silica substrate which serves as an optical interconnect between the devices. Two Diffractive Optical Elements (DOEs) are etched into the fused silica substrate to focus the VCSEL beam and increase the scan range. The silicon MEMS scanner consists of an actuator that continuously scans the position of a large polysilicon gold-coated shuttle containing a third DOE. Interferometric measurements show that the residual stress in the 500 {micro}m x 1000 {micro}m shuttle is extremely low, with a maximum deflection of only 0.18{micro}m over an 800 {micro}m span for an unmetallized case and a deflection of 0.56{micro}m for the metallized case. A conservative estimate for the scan range is {approximately}{+-}4{degree}, with a spot size of about 0.5 mm, producing 50 resolvable spots. The basic system architecture, optical and MEMS design is reported in this paper, with an emphasis on the design and fabrication of the silicon MEMS scanner portion of the system.

  3. Failure analysis for micro-electrical-mechanical systems (MEMS)

    SciTech Connect

    Peterson, K.A.; Tangyunyong, P.; Barton, D.L.

    1997-10-01

    Micro-Electrical Mechanical Systems (MEMS) is an emerging technology with demonstrated potential for a wide range of applications including sensors and actuators for medical, industrial, consumer, military, automotive and instrumentation products. Failure analysis (FA) of MEMS is critically needed for the successful design, fabrication, performance analysis and reliability assurance of this new technology. Many devices have been examined using techniques developed for integrated circuit analysis, including optical inspection, scanning laser microscopy (SLM), scanning electron microscopy (SEM), focused ion beam (FIB) techniques, atomic force microscopy (AFM), infrared (IR) microscopy, light emission (LE) microscopy, acoustic microscopy and acoustic emission analysis. For example, the FIB was used to microsection microengines that developed poor performance characteristics. Subsequent SEM analysis clearly demonstrated the absence of wear on gear, hub, and pin joint bearing surfaces, contrary to expectations. Another example involved the use of infrared microscopy for thermal analysis of operating microengines. Hot spots were located, which did not involve the gear or hub, but indicated contact between comb structures which drive microengines. Voltage contrast imaging proved useful on static and operating MEMS in both the SEM and the FIB and identified electrostatic clamping as a potentially significant contributor to failure mechanisms in microengines. This work describes MEMS devices, FA techniques, failure modes, and examples of FA of MEMS.

  4. Real-space post-processing correction of thermal drift and piezoelectric actuator nonlinearities in scanning tunneling microscope images

    NASA Astrophysics Data System (ADS)

    Yothers, Mitchell P.; Browder, Aaron E.; Bumm, Lloyd A.

    2017-01-01

    We have developed a real-space method to correct distortion due to thermal drift and piezoelectric actuator nonlinearities on scanning tunneling microscope images using Matlab. The method uses the known structures typically present in high-resolution atomic and molecularly resolved images as an internal standard. Each image feature (atom or molecule) is first identified in the image. The locations of each feature's nearest neighbors are used to measure the local distortion at that location. The local distortion map across the image is simultaneously fit to our distortion model, which includes thermal drift in addition to piezoelectric actuator hysteresis and creep. The image coordinates of the features and image pixels are corrected using an inverse transform from the distortion model. We call this technique the thermal-drift, hysteresis, and creep transform. Performing the correction in real space allows defects, domain boundaries, and step edges to be excluded with a spatial mask. Additional real-space image analyses are now possible with these corrected images. Using graphite(0001) as a model system, we show lattice fitting to the corrected image, averaged unit cell images, and symmetry-averaged unit cell images. Statistical analysis of the distribution of the image features around their best-fit lattice sites measures the aggregate noise in the image, which can be expressed as feature confidence ellipsoids.

  5. Optical coherence tomography endoscopic probe based on a tilted MEMS mirror

    PubMed Central

    Duan, Can; Tanguy, Quentin; Pozzi, Antonio; Xie, Huikai

    2016-01-01

    This paper reports a compact microendoscopic OCT probe with an outer diameter of only 2.7 mm. The small diameter is enabled by a novel 2-axis scanning MEMS mirror with a preset 45° tilted angle. The tilted MEMS mirror is directly integrated on a silicon optical bench (SiOB). The SiOB provides mechanical support and electrical wiring to the mirror plate via a set of bimorph flexure, enabling a compact probe mount design without the requirement of a 45° slope, which is capable to dramatically reduce the probe size and ease the assembly process. Additionally, the SiOB also provides trenches with properly-designed opening widths for automatic alignment of the MEMS mirror, GRIN lens and optical fiber. The 45°-tilted MEMS mirror plate is actuated by four electrothermal bimorph actuators. The packaged 2.7 mm-diameter probe offers 2-axis side-view optical scanning with a large optical scan range of 40° at a low drive voltage of 5.5 Vdc in both axes, allowing a lateral scan area of 2.2 mm × 2.2 mm at a 3 mm working distance. High-resolution 2D and 3D OCT images of the IR card, ex vivo imaging of meniscus specimens and rat brain slices, in vivo imaging of the human finger and nail have been obtained with a TDOCT system. PMID:27699103

  6. MEMS Memory Elements

    NASA Technical Reports Server (NTRS)

    Carley, L. Richard; El-Sayed, Rany Tawfik; Guillou, David F.; Alfaro, Fernando; Fedder, Gary K.; Schlosser, Steven W.; Griffin, John L.; Nagle, David F.; Ganger, Gregory R.; Bain, James

    2001-01-01

    This paper presents a design example that illustrates the potential of microelectromechanical systems (MEMS) to perform the mechanical positioning required for addressing stored data and to enable an entirely new mechanism for reading and writing magnetic data. Specifically, MEMS sensors and actuators can be used to achieve active servo control of the separation between magnetic probe tips and a media surface with sub-nanometer accuracy. This allows mechanical position to be used to selectively write magnetic marks in a continuous thin-film magnetic media. In addition, MEMS sensors can be used to measure the separation between a magnetic probe tip and the media with a noise floor of roughly 22 picometers, allowing them to be used as position sensors in a magnetic force microscope (MFM) style data detection system.

  7. A MEMS-based heating holder for the direct imaging of simultaneous in-situ heating and biasing experiments in scanning/transmission electron microscopes.

    PubMed

    Mele, Luigi; Konings, Stan; Dona, Pleun; Evertz, Francis; Mitterbauer, Christoph; Faber, Pybe; Schampers, Ruud; Jinschek, Joerg R

    2016-04-01

    The introduction of scanning/transmission electron microscopes (S/TEM) with sub-Angstrom resolution as well as fast and sensitive detection solutions support direct observation of dynamic phenomena in-situ at the atomic scale. Thereby, in-situ specimen holders play a crucial role: accurate control of the applied in-situ stimulus on the nanostructure combined with the overall system stability to assure atomic resolution are paramount for a successful in-situ S/TEM experiment. For those reasons, MEMS-based TEM sample holders are becoming one of the preferred choices, also enabling a high precision in measurements of the in-situ parameter for more reproducible data. A newly developed MEMS-based microheater is presented in combination with the new NanoEx™-i/v TEM sample holder. The concept is built on a four-point probe temperature measurement approach allowing active, accurate local temperature control as well as calorimetry. In this paper, it is shown that it provides high temperature stability up to 1,300°C with a peak temperature of 1,500°C (also working accurately in gaseous environments), high temperature measurement accuracy (<4%) and uniform temperature distribution over the heated specimen area (<1%), enabling not only in-situ S/TEM imaging experiments, but also elemental mapping at elevated temperatures using energy-dispersive X-ray spectroscopy (EDS). Moreover, it has the unique capability to enable simultaneous heating and biasing experiments.

  8. Heterogeneous MEMS device assembly and integration

    NASA Astrophysics Data System (ADS)

    Topart, Patrice; Picard, Francis; Ilias, Samir; Alain, Christine; Chevalier, Claude; Fisette, Bruno; Paultre, Jacques E.; Généreux, Francis; Legros, Mathieu; Lepage, Jean-François; Laverdière, Christian; Ngo Phong, Linh; Caron, Jean-Sol; Desroches, Yan

    2014-03-01

    In recent years, smart phone applications have both raised the pressure for cost and time to market reduction, and the need for high performance MEMS devices. This trend has led the MEMS community to develop multi-die packaging of different functionalities or multi-technology (i.e. wafer) approaches to fabricate and assemble devices respectively. This paper reports on the fabrication, assembly and packaging at INO of various MEMS devices using heterogeneous assembly at chip and package-level. First, the performance of a giant (e.g. about 3 mm in diameter), electrostatically actuated beam steering mirror is presented. It can be rotated about two perpendicular axes to steer an optical beam within an angular cone of up to 60° in vector scan mode with an angular resolution of 1 mrad and a response time of 300 ms. To achieve such angular performance relative to mirror size, the microassembly was performed from sub-components fabricated from 4 different wafers. To combine infrared detection with inertial sensing, an electroplated proof mass was flip-chipped onto a 256×1 pixel uncooled bolometric FPA and released using laser ablation. In addition to the microassembly technology, performance results of packaged devices are presented. Finally, to simulate a 3072×3 pixel uncooled detector for cloud and fire imaging in mid and long-wave IR, the staggered assembly of six 512×3 pixel FPAs with a less than 50 micron pixel co-registration is reported.

  9. Electrostatic micromembrane actuator arrays as motion generator

    NASA Astrophysics Data System (ADS)

    Wu, X. T.; Hui, J.; Young, M.; Kayatta, P.; Wong, J.; Kennith, D.; Zhe, J.; Warde, C.

    2004-05-01

    A rigid-body motion generator based on an array of micromembrane actuators is described. Unlike previous microelectromechanical systems (MEMS) techniques, the architecture employs a large number (typically greater than 1000) of micron-sized (10-200 μm) membrane actuators to simultaneously generate the displacement of a large rigid body, such as a conventional optical mirror. For optical applications, the approach provides optical design freedom of MEMS mirrors by enabling large-aperture mirrors to be driven electrostatically by MEMS actuators. The micromembrane actuator arrays have been built using a stacked architecture similar to that employed in the Multiuser MEMS Process (MUMPS), and the motion transfer from the arrayed micron-sized actuators to macro-sized components was demonstrated.

  10. Bistable microelectromechanical actuator

    DOEpatents

    Fleming, James G.

    1999-01-01

    A bistable microelectromechanical (MEM) actuator is formed on a substrate and includes a stressed membrane of generally rectangular shape that upon release assumes a curvilinear cross-sectional shape due to attachment at a midpoint to a resilient member and at opposing edges to a pair of elongate supports. The stressed membrane can be electrostatically switched between a pair of mechanical states having mirror-image symmetry, with the MEM actuator remaining in a quiescent state after a programming voltage is removed. The bistable MEM actuator according to various embodiments of the present invention can be used to form a nonvolatile memory element, an optical modulator (with a pair of mirrors supported above the membrane and moving in synchronism as the membrane is switched), a switchable mirror (with a single mirror supported above the membrane at the midpoint thereof) and a latching relay (with a pair of contacts that open and close as the membrane is switched). Arrays of bistable MEM actuators can be formed for applications including nonvolatile memories, optical displays and optical computing.

  11. Bistable microelectromechanical actuator

    DOEpatents

    Fleming, J.G.

    1999-02-02

    A bistable microelectromechanical (MEM) actuator is formed on a substrate and includes a stressed membrane of generally rectangular shape that upon release assumes a curvilinear cross-sectional shape due to attachment at a midpoint to a resilient member and at opposing edges to a pair of elongate supports. The stressed membrane can be electrostatically switched between a pair of mechanical states having mirror-image symmetry, with the MEM actuator remaining in a quiescent state after a programming voltage is removed. The bistable MEM actuator according to various embodiments of the present invention can be used to form a nonvolatile memory element, an optical modulator (with a pair of mirrors supported above the membrane and moving in synchronism as the membrane is switched), a switchable mirror (with a single mirror supported above the membrane at the midpoint thereof) and a latching relay (with a pair of contacts that open and close as the membrane is switched). Arrays of bistable MEM actuators can be formed for applications including nonvolatile memories, optical displays and optical computing. 49 figs.

  12. Inertial measurement unit using rotatable MEMS sensors

    DOEpatents

    Kohler, Stewart M.; Allen, James J.

    2006-06-27

    A MEM inertial sensor (e.g. accelerometer, gyroscope) having integral rotational means for providing static and dynamic bias compensation is disclosed. A bias compensated MEM inertial sensor is described comprising a MEM inertial sense element disposed on a rotatable MEM stage. A MEM actuator for drives the rotation of the stage between at least two predetermined rotational positions. Measuring and comparing the output of the MEM inertial sensor in the at least two rotational positions allows, for both static and dynamic bias compensation in inertial calculations based on the sensor's output. An inertial measurement unit (IMU) comprising a plurality of independently rotatable MEM inertial sensors and methods for making bias compensated inertial measurements are disclosed.

  13. Inertial measurement unit using rotatable MEMS sensors

    DOEpatents

    Kohler, Stewart M.; Allen, James J.

    2007-05-01

    A MEM inertial sensor (e.g. accelerometer, gyroscope) having integral rotational means for providing static and dynamic bias compensation is disclosed. A bias compensated MEM inertial sensor is described comprising a MEM inertial sense element disposed on a rotatable MEM stage. A MEM actuator drives the rotation of the stage between at least two predetermined rotational positions. Measuring and comparing the output of the MEM inertial sensor in the at least two rotational positions allows for both static and dynamic bias compensation in inertial calculations based on the sensor's output. An inertial measurement unit (IMU) comprising a plurality of independently rotatable MEM inertial sensors and methods for making bias compensated inertial measurements are disclosed.

  14. Fast electrochemical actuator

    NASA Astrophysics Data System (ADS)

    Uvarov, I. V.; Postnikov, A. V.; Svetovoy, V. B.

    2016-03-01

    Lack of fast and strong microactuators is a well-recognized problem in MEMS community. Electrochemical actuators can develop high pressure but they are notoriously slow. Water electrolysis produced by short voltage pulses of alternating polarity can overcome the problem of slow gas termination. Here we demonstrate an actuation regime, for which the gas pressure is relaxed just for 10 μs or so. The actuator consists of a microchamber filled with the electrolyte and covered with a flexible membrane. The membrane bends outward when the pressure in the chamber increases. Fast termination of gas and high pressure developed in the chamber are related to a high density of nanobubbles in the chamber. The physical processes happening in the chamber are discussed so as problems that have to be resolved for practical applications of this actuation regime. The actuator can be used as a driving engine for microfluidics.

  15. In situ TEM/SEM electronic/mechanical characterization of nano material with MEMS chip

    NASA Astrophysics Data System (ADS)

    Yuelin, Wang; Tie, Li; Xiao, Zhang; Hongjiang, Zeng; Qinhua, Jin

    2014-08-01

    Our investigation of in situ observations on electronic and mechanical properties of nano materials using a scanning electron microscope (SEM) and a transmission electron microscope (TEM) with the help of traditional micro-electro-mechanical system (MEMS) technology has been reviewed. Thanks to the stability, continuity and controllability of the loading force from the electrostatic actuator and the sensitivity of the sensor beam, a MEMS tensile testing chip for accurate tensile testing in the nano scale is obtained. Based on the MEMS chips, the scale effect of Young's modulus in silicon has been studied and confirmed directly in a tensile experiment using a transmission electron microscope. Employing the nanomanipulation technology and FIB technology, Cu and SiC nanowires have been integrated into the tensile testing device and their mechanical, electronic properties under different stress have been achieved, simultaneously. All these will aid in better understanding the nano effects and contribute to the designation and application in nano devices.

  16. MEMS packaging efforts at Sandia National Laboratories.

    SciTech Connect

    Custer, Jonathan Sloane

    2003-02-01

    Sandia National Laboratories has programs covering a broad range of MEMS technologies from LIGA to bulk to surface micromachining. These MEMS technologies are being considered for an equally broad range of applications, including sensors, actuators, optics, and microfluidics. As these technologies have moved from the research to the prototype product stage, packaging has been required to develop new capabilities to integrated MEMS and other technologies into functional microsystems. This paper discusses several of Sandia's MEMS packaging efforts, focusing mainly on inserting Sandia's SUMMIT V (5-level polysilicon) surface micromachining technology into fieldable microsystems.

  17. MEMS microgrippers with thin gripping tips

    NASA Astrophysics Data System (ADS)

    Chen, Brandon K.; Zhang, Yong; Perovic, Doug D.; Sun, Yu

    2011-10-01

    Gripping small objects requires tool tips of comparable dimensions. Current methods for miniaturizing an MEMS tool entirely down to sub-micrometer in dimensions, however, come with significant tradeoffs in device performance. This paper presents a microfabrication approach to selectively miniaturize gripping tips only to sub-micrometers in thickness. The process involves using the thin buried SiO2 layer of a standard silicon-on-insulator wafer to form gripping tips, and using the thick device silicon layer to construct high-aspect-ratio structures for structural, sensing, and actuation functions. The microgrippers with thin gripping tips (i.e. finger-nail-like) were experimentally characterized and applied to gripping 100 nm gold spheres inside a scanning electron microscope.

  18. Electrolysis-based diaphragm actuators

    NASA Astrophysics Data System (ADS)

    Pang, C.; Tai, Y.-C.; Burdick, J. W.; Andersen, R. A.

    2006-02-01

    This work presents a new electrolysis-based microelectromechanical systems (MEMS) diaphragm actuator. Electrolysis is a technique for converting electrical energy to pneumatic energy. Theoretically electrolysis can achieve a strain of 136 000% and is capable of generating a pressure above 200 MPa. Electrolysis actuators require modest electrical power and produce minimal heat. Due to the large volume expansion obtained via electrolysis, small actuators can create a large force. Up to 100 µm of movement was achieved by a 3 mm diaphragm. The actuator operates at room temperature and has a latching and reversing capability.

  19. Microelectromechanical Systems Actuator Based Reconfigurable Printed Antenna

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N. (Inventor)

    2005-01-01

    A polarization reconfigurable patch antenna is disclosed. The antenna includes a feed element, a patch antenna element electrically connected to the feed element, and at least one microelectromechanical systems (MEMS) actuator, with a partial connection to the patch antenna element along an edge of the patch antenna element. The polarization of the antenna can be switched between circular polarization and linear polarization through action of the at least one MEMS actuator.

  20. International Center For Actuators And Transducers

    DTIC Science & Technology

    2003-06-01

    field-controlled actuators. In addition to these, we will consider silicon -based micro- electro- mechanical -systems ( MEMS ), polymer artificial muscles...detrimental environmental effects ( mechanical noise, electro-magnetic noise, heat generation, etc.). (3) MEMS : MicroElectromechanical Systems Silicon ...has become almost synonymous with integrated electronic circuitry. Due to its favorable mechanical properties , silicon can also be micromachined to

  1. Printed Antennas Made Reconfigurable by Use of MEMS Switches

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.

    2005-01-01

    A class of reconfigurable microwave antennas now undergoing development comprise fairly conventional printed-circuit feed elements and radiating patches integrated with novel switches containing actuators of the microelectromechanical systems (MEMS) type. In comparison with solid-state electronic control devices incorporated into some prior printed microwave antennas, the MEMS-based switches in these antennas impose lower insertion losses and consume less power. Because the radio-frequency responses of the MEMS switches are more nearly linear, they introduce less signal distortion. In addition, construction and operation are simplified because only a single DC bias line is needed to control each MEMS actuator.

  2. Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system

    NASA Astrophysics Data System (ADS)

    Chen, Hui; Chen, Albert; Jie Sun, Wei; Sun, Zhen Dong; Yeow, John TW

    2016-01-01

    This article presents the development and implementation of a robust nonlinear control scheme for a 2-D micromirror-based laser scanning microscope system. The presented control scheme, built around sliding mode control approach and augmented an adaptive algorithm, is proposed to improve the tracking accuracy in presence of cross-axis effect. The closed-loop controlled imaging system is developed through integrating a 2-D micromirror with sidewall electrodes (SW), a laser source, NI field-programmable gate array (FPGA) hardware, the optics, position sensing detector (PSD) and photo detector (PD). The experimental results demonstrated that the proposed scheme is able to achieve accurate tracking of a reference triangular signal. Compared with open-loop control, the scanning performance is significantly improved, and a better 2-D image is obtained using the micromirror with the proposed scheme.

  3. Mid infrared MEMS FTIR spectrometer

    NASA Astrophysics Data System (ADS)

    Erfan, Mazen; Sabry, Yasser M.; Mortada, Bassem; Sharaf, Khaled; Khalil, Diaa

    2016-03-01

    In this work we report, for the first time to the best of our knowledge, a bulk-micromachined wideband MEMS-based spectrometer covering both the NIR and the MIR ranges and working from 1200 nm to 4800 nm. The core engine of the spectrometer is a scanning Michelson interferometer micro-fabricated using deep reactive ion etching (DRIE) technology. The spectrum is obtained using the Fourier Transform techniques that allows covering a very wide spectral range limited by the detector responsivity. The moving mirror of the interferometer is driven by a relatively large stroke electrostatic comb-drive actuator. Zirconium fluoride (ZrF4) multimode optical fibers are used to connect light between the white light source and the interferometer input, as well as the interferometer output to a PbSe photoconductive detector. The recorded signal-to-noise ratio is 25 dB at the wavelength of 3350 nm. The spectrometer is successfully used in measuring the absorption spectra of methylene chloride, quartz glass and polystyrene film. The presented solution provides a low cost method for producing miniaturized spectrometers in the near-/mid-infrared.

  4. SCAN+

    SciTech Connect

    Kenneth Krebs, John Svoboda

    2009-11-01

    SCAN+ is a software application specifically designed to control the positioning of a gamma spectrometer by a two dimensional translation system above spent fuel bundles located in a sealed spent fuel cask. The gamma spectrometer collects gamma spectrum information for the purpose of spent fuel cask fuel loading verification. SCAN+ performs manual and automatic gamma spectrometer positioning functions as-well-as exercising control of the gamma spectrometer data acquisitioning functions. Cask configuration files are used to determine the positions of spent fuel bundles. Cask scanning files are used to determine the desired scan paths for scanning a spent fuel cask allowing for automatic unattended cask scanning that may take several hours.

  5. A Low-voltage high-torque two-degree-of-freedom scanning micromirror for ECOM applications

    NASA Astrophysics Data System (ADS)

    Yeow, Tze-Wei; Lim, K. Y.; Wilson, B.; Goldenberg, Andrew A.

    2003-02-01

    This paper presents a novel 2D-scanning micro-mirror used in ECOM for in vivo and in situ tissue imaging using MEMS technology. The 2D scanner accomplishes Raster Scanning with just one mirror. The size of the mirror is 1mm by 1mm and is rotated about two axes giving it two degree of freedom. The scanning mirror is actuated electrostatically. The inherent disadvantages of electrostatic actuation such as high crosstalk between electrodes, and large nonlinearity in voltage to angle relationship are systematically addressed. In the context of biomedical applications, it is desirable to minimize the driving voltage requirements of the electrostatic actuators while maintaining the same scan angle. The optical scanner described in this paper is capable of generating large scan angles with low driving voltages, thus making it highly suitable for biomedical imaging.

  6. Design of Surface micromachined Compliant MEMS

    SciTech Connect

    Bradley, Joe Anthony

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  7. Design of Surface Micromachined Compliant MEMS

    SciTech Connect

    Bradley, Joe Anthony

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  8. Compact electrostatic comb actuator

    DOEpatents

    Rodgers, M. Steven; Burg, Michael S.; Jensen, Brian D.; Miller, Samuel L.; Barnes, Stephen M.

    2000-01-01

    A compact electrostatic comb actuator is disclosed for microelectromechanical (MEM) applications. The actuator is based upon a plurality of meshed electrostatic combs, some of which are stationary and others of which are moveable. One or more restoring springs are fabricated within an outline of the electrostatic combs (i.e. superposed with the moveable electrostatic combs) to considerably reduce the space required for the actuator. Additionally, a truss structure is provided to support the moveable electrostatic combs and prevent bending or distortion of these combs due to unbalanced electrostatic forces or external loading. The truss structure formed about the moveable electrostatic combs allows the spacing between the interdigitated fingers of the combs to be reduced to about one micron or less, thereby substantially increasing the number of active fingers which can be provided in a given area. Finally, electrostatic shields can be used in the actuator to substantially reduce unwanted electrostatic fields to further improve performance of the device. As a result, the compact electrostatic comb actuator of the present invention occupies only a fraction of the space required for conventional electrostatic comb actuators, while providing a substantial increase in the available drive force (up to one-hundred times).

  9. Electrothermally-Actuated Micromirrors with Bimorph Actuators--Bending-Type and Torsion-Type.

    PubMed

    Tsai, Cheng-Hua; Tsai, Chun-Wei; Chang, Hsu-Tang; Liu, Shih-Hsiang; Tsai, Jui-Che

    2015-06-22

    Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.

  10. Bi-directional electrothermal electromagnetic actuators

    NASA Astrophysics Data System (ADS)

    Cao, Andrew; Kim, Jongbaeg; Lin, Liwei

    2007-05-01

    A new breed of in-plane bi-directional MEMS actuators based on controlled electrothermal buckling and electromagnetic Lorentz force has been demonstrated under both dc and ac operations. Experimentally, bi-directional actuators made by the standard surface-micromachining process have a lateral actuation range of several microns and can exert forces over 100 µN, while those made by SOI and MetalMUMPs processes have an operation range up to several tens of microns and can exert more than 20 mN of force. Reliability tests show that SOI/MetalMUMPs and surface-micromachined actuators can operate for more than 1 and 100 million cycles, respectively, with no signs of degradation. As such, these micro-actuators could be used for MEMS devices that require a bi-directional movement with a large force output such as bi-directional micro-relays.

  11. A Teaching - Learning Framework for MEMS Education

    NASA Astrophysics Data System (ADS)

    Sheeparamatti, B. G.; Angadi, S. A.; Sheeparamatti, R. B.; Kadadevaramath, J. S.

    2006-04-01

    Micro-Electro-Mechanical Systems (MEMS) technology has been identified as one of the most promising technologies in the 21st century. MEMS technology has opened up a wide array of unforeseen applications. Hence it is necessary to train the technocrats of tomorrow in this emerging field to meet the industrial/societal demands. The drive behind fostering of MEMS technology is the reduction in the cost, size, weight, and power consumption of the sensors, actuators, and associated electronics. MEMS is a multidisciplinary engineering and basic science area which includes electrical engineering, mechanical engineering, material science and biomedical engineering. Hence MEMS education needs a special approach to prepare the technocrats for a career in MEMS. The modern education methodology using computer based training systems (CBTS) with embedded modeling and simulation tools will help in this direction. The availability of computer based learning resources such as MATLAB, ANSYS/Multiphysics and rapid prototyping tools have contributed to proposition of an efficient teaching-learning framework for MEMS education presented in this paper. This paper proposes a conceptual framework for teaching/learning MEMS in the current technical education scenario.

  12. Reliability modelling and analysis of thermal MEMS

    NASA Astrophysics Data System (ADS)

    Muratet, Sylvaine; Lavu, Srikanth; Fourniols, Jean-Yves; Bell, George; Desmulliez, Marc P. Y.

    2006-04-01

    This paper presents a MEMS reliability study methodology based on the novel concept of 'virtual prototyping'. This methodology can be used for the development of reliable sensors or actuators and also to characterize their behaviour in specific use conditions and applications. The methodology is demonstrated on the U-shaped micro electro thermal actuator used as test vehicle. To demonstrate this approach, a 'virtual prototype' has been developed with the modeling tools MatLab and VHDL-AMS. A best practice FMEA (Failure Mode and Effect Analysis) is applied on the thermal MEMS to investigate and assess the failure mechanisms. Reliability study is performed by injecting the identified defaults into the 'virtual prototype'. The reliability characterization methodology predicts the evolution of the behavior of these MEMS as a function of the number of cycles of operation and specific operational conditions.

  13. Failure modes in surface micromachined microelectromechanical actuators

    SciTech Connect

    Miller, S.L.; Rodgers, M.S.; LaVigne, G.; Sniegowski, J.J.; Clews, P.; Tanner, D.M.; Peterson, K.A.

    1998-03-01

    In order for the rapidly emerging field of MicroElectroMechanical Systems (MEMS) to meet its extraordinary expectations regarding commercial impact, issues pertaining to how they fail must be understood. The authors identify failure modes common to a broad range of MEMS actuators, including adhesion (stiction) and friction induced failures caused by improper operational methods, mechanical instabilities, and electrical instabilities. Demonstrated methods to mitigate these failure modes include implementing optimized designs, model based operational methods, and chemical surface treatments.

  14. Compact, planar, translational piezoelectric bimorph actuator with Archimedes’ spiral actuating tethers

    NASA Astrophysics Data System (ADS)

    Yang, Chenye; Liu, Sanwei; Xie, Xin; Livermore, Carol

    2016-12-01

    The design, analytical modelling, finite element analysis (FEA), and experimental characterization of a microelectromechanical system (MEMS) out-of-plane (vertical) translational piezoelectric lead-zirconate-titanate (PZT) bimorph actuator supported on Archimedes’ spiral tethers are presented. Three types of bimorph actuators with different electrode patterns (with spiral tethers half actuated, fully actuated with uniform polarity, or fully actuated with reversed polarity) are designed and modelled. The two actuators with the highest predicted performance (half actuated and fully actuated with uniform polarity) are implemented and characterized. Both designs are fabricated by commercial processes and are compatible with integration into more complex MEMS systems. Analytical modelling and FEA are used to analyze and predict the actuators’ displacements and blocking forces. Experimental measurements of the deflections and blocking forces of actuators with full uniform actuation and half actuation validate the design. At an applied voltage of 110 V, the out-of-plane deflections of the actuators with half actuation and full uniform actuation are measured at about 17 µm and 29 µm respectively, in good agreement with analytical predictions of 17.3 µm and 34.2 µm and FEA predictions of 17.1 µm and 25.8 µm. The blocking force for devices with half-actuated tethers is predicted to be 12 mN (analytical) and 10 mN (FEA), close to the experimental value of 9 mN. The blocking force for devices with full uniform actuation is predicted to be 23 mN (analytical) and 17 mN (FEA), as compared with 15 mN in experiments.

  15. Remotely accessible laboratory for MEMS testing

    NASA Astrophysics Data System (ADS)

    Sivakumar, Ganapathy; Mulsow, Matthew; Melinger, Aaron; Lacouture, Shelby; Dallas, Tim E.

    2010-02-01

    We report on the construction of a remotely accessible and interactive laboratory for testing microdevices (aka: MicroElectroMechancial Systems - MEMS). Enabling expanded utilization of microdevices for research, commercial, and educational purposes is very important for driving the creation of future MEMS devices and applications. Unfortunately, the relatively high costs associated with MEMS devices and testing infrastructure makes widespread access to the world of MEMS difficult. The creation of a virtual lab to control and actuate MEMS devices over the internet helps spread knowledge to a larger audience. A host laboratory has been established that contains a digital microscope, microdevices, controllers, and computers that can be logged into through the internet. The overall layout of the tele-operated MEMS laboratory system can be divided into two major parts: the server side and the client side. The server-side is present at Texas Tech University, and hosts a server machine that runs the Linux operating system and is used for interfacing the MEMS lab with the outside world via internet. The controls from the clients are transferred to the lab side through the server interface. The server interacts with the electronics required to drive the MEMS devices using a range of National Instruments hardware and LabView Virtual Instruments. An optical microscope (100 ×) with a CCD video camera is used to capture images of the operating MEMS. The server broadcasts the live video stream over the internet to the clients through the website. When the button is pressed on the website, the MEMS device responds and the video stream shows the movement in close to real time.

  16. Design and characterization of MEMS interferometric sensing

    NASA Astrophysics Data System (ADS)

    Snyder, R.; Siahmakoun, A.

    2010-02-01

    A MEMS-based interferometric sensor is produced using the multi-user MEMS processing standard (MUMPS) micromirrors, movable by thermal actuation. The interferometer is comprised of gold reflection surfaces, polysilicon thermal actuators, hinges, latches and thin film polarization beam splitters. A polysilicon film of 3.5 microns reflects and transmits incident polarized light from an external laser source coupled to a multi-mode optical fiber. The input beam is shaped to a diameter of 10 to 20 microns for incidence upon the 100 micron mirrors. Losses in the optical path include diffraction effects from etch holes created in the manufacturing process, surface roughness of both gold and polysilicon layers, and misalignment of micro-scale optical components. Numerous optical paths on the chip vary by length, number of reflections, and mirror subsystems employed. Subsystems include thermal actuator batteries producing lateral position displacement, angularly tunable mirrors, double reflection surfaces, and static vertical mirrors. All mirror systems are raised via manual stimulation using two micron, residue-free probe tips and some may be aligned using electrical signals causing resistive heating in thermal actuators. The characterization of thermal actuator batteries includes maximum displacement, deflection, and frequency response that coincides with theoretical thermodynamic simulations using finite-element analysis. Maximum deflection of 35 microns at 400 mW input electrical power is shown for three types of actuator batteries as is deflection dependent frequency response data for electrical input signals up to 10 kHz.

  17. Liquid Tunable Microlenses based on MEMS techniques

    PubMed Central

    Zeng, Xuefeng; Jiang, Hongrui

    2013-01-01

    The recent rapid development in microlens technology has provided many opportunities for miniaturized optical systems, and has found a wide range of applications. Of these microlenses, tunable-focus microlenses are of special interest as their focal lengths can be tuned using micro-scale actuators integrated with the lens structure. Realization of such tunable microlens generally relies on the microelectromechanical system (MEMS) technologies. Here, we review the recent progress in tunable liquid microlenses. The underlying physics relevant to these microlenses are first discussed, followed by description of three main categories of tunable microlenses involving MEMS techniques, mechanically driven, electrically driven, and those integrated within microfluidic systems. PMID:24163480

  18. MEMS Louvers for Thermal Control

    NASA Technical Reports Server (NTRS)

    Champion, J. L.; Osiander, R.; Darrin, M. A. Garrison; Swanson, T. D.

    1998-01-01

    Mechanical louvers have frequently been used for spacecraft and instrument thermal control purposes. These devices typically consist of parallel or radial vanes, which can be opened or closed to vary the effective emissivity of the underlying surface. This project demonstrates the feasibility of using Micro-Electromechanical Systems (MEMS) technology to miniaturize louvers for such purposes. This concept offers the possibility of substituting the smaller, lighter weight, more rugged, and less costly MEMS devices for such mechanical louvers. In effect, a smart skin that self adjusts in response to environmental influences could be developed composed of arrays of thousands of miniaturized louvers. Several orders of magnitude size, weight, and volume decreases are potentially achieved using micro-electromechanical techniques. The use of this technology offers substantial benefits in spacecraft/instrument design, integration and testing, and flight operations. It will be particularly beneficial for the emerging smaller spacecraft and instruments of the future. In addition, this MEMS thermal louver technology can form the basis for related spacecraft instrument applications. The specific goal of this effort was to develop a preliminary MEMS device capable of modulating the effective emissivity of radiators on spacecraft. The concept pursued uses hinged panels, or louvers, in a manner such that heat emitted from the radiators is a function of louver angle. An electrostatic comb drive or other such actuator can control the louver position. The initial design calls for the louvers to be gold coated while the underlying surface is of high emissivity. Since, the base MEMS material, silicon, is transparent in the InfraRed (IR) spectrum, the device has a minimum emissivity when closed and a maximum emissivity when open. An initial set of polysilicon louver devices was designed at the Johns Hopkins Applied Physics Laboratory in conjunction with the Thermal Engineering Branch at

  19. Vibration nullification of MEMS device using input shaping

    NASA Astrophysics Data System (ADS)

    Jordan, Scott; Lawrence, Eric M.

    2003-07-01

    The active silicon microstructures known as Micro-Electromechanical Systems (MEMS) are improving many existing technologies through simplification and cost reduction. Many industries have already capitalized on MEMS technology such as those in fields as diverse as telecommunications, computing, projection displays, automotive safety, defense and biotechnology. As they grow in sophistication and complexity, the familiar pressures to further reduce costs and increase performance grow for those who design and manufacture MEMS devices and the engineers who specify them for their end applications. One example is MEMS optical switches that have evolved from simple, bistable on/off elements to microscopic, freelypositionable beam steering optics. These can be actuated to discrete angular positions or to continuously-variable angular states through applied command signals. Unfortunately, elaborate closed-loop actuation schemes are often necessitated in order to stabilize the actuation. Furthermore, preventing one actuated micro-element from vibrationally cross-coupling with its neighbors is another reason costly closed-loop approaches are thought to be necessary. The Laser Doppler Vibrometer (LDV) is a valuable tool for MEMS characterization that provides non-contact, real-time measurements of velocity and/or displacement response. The LDV is a proven technology for production metrology to determine dynamical behaviors of MEMS elements, which can be a sensitive indicator of manufacturing variables such as film thickness, etch depth, feature tolerances, handling damage and particulate contamination. They are also important for characterizing the actuation dynamics of MEMS elements for implementation of a patented controls technique called Input Shaping«, which we show here can virtually eliminate the vibratory resonant response of MEMS elements even when subjected to the most severe actuation profiles. In this paper, we will demonstrate the use of the LDV to determine how

  20. Magnetic actuated FR4 scanners for compact spectrometers

    NASA Astrophysics Data System (ADS)

    Ataman, Çağlar; Urey, Hakan

    2008-04-01

    A novel magnetic actuated polymer optical platform is integrated into a Michelson interferometer type Fourier transform infrared spectrometer. The proposed advantages of the novel platform over existing approaches, such as MEMS spectrometers, or bulky FTIR systems, include millimeter range dimensions providing a large clear aperture and enabling conventional machining for device fabrication, a controllable AC and/or DC motion both in rotational and translational modes, and low frequency operation. It has been demonstrated that the platform is capable of achieving 400μm DC deflection in ambient pressure in the translational mode, and a total optical scan angle exceeding 60 degrees in the resonant rotational mode. A Michelson type Fourier transform spectrometer was built using a retro-reflector bearing FR4 platform and a spectral resolution of 25cm -1 is demonstrated with this setup. In addition, possible use of the same platform in various other spectrometer configurations and methods to improve the motion precision are discussed.

  1. Giant piezoelectricity on Si for hyperactive MEMS.

    PubMed

    Baek, S H; Park, J; Kim, D M; Aksyuk, V A; Das, R R; Bu, S D; Felker, D A; Lettieri, J; Vaithyanathan, V; Bharadwaja, S S N; Bassiri-Gharb, N; Chen, Y B; Sun, H P; Folkman, C M; Jang, H W; Kreft, D J; Streiffer, S K; Ramesh, R; Pan, X Q; Trolier-McKinstry, S; Schlom, D G; Rzchowski, M S; Blick, R H; Eom, C B

    2011-11-18

    Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO(3) template layer with superior piezoelectric coefficients (e(31,f) = -27 ± 3 coulombs per square meter) and figures of merit for piezoelectric energy-harvesting systems. We have incorporated these heterostructures into microcantilevers that are actuated with extremely low drive voltage due to thin-film piezoelectric properties that rival bulk PMN-PT single crystals. These epitaxial heterostructures exhibit very large electromechanical coupling for ultrasound medical imaging, microfluidic control, mechanical sensing, and energy harvesting.

  2. RF MEMS reconfigurable triangular patch antenna.

    SciTech Connect

    Nordquist, Christopher Daniel; Christodoulou, Christos George; Feldner, Lucas Matthew

    2005-01-01

    A Ka-band RF MEMS enabled frequency reconfigurable triangular microstrip patch antenna has been designed for monolithic integration with RF MEMS phase shifters to demonstrate a low-cost monolithic passive electronically scanned array (PESA). This paper introduces our first prototype reconfigurable triangular patch antenna currently in fabrication. The aperture coupled patch antenna is fabricated on a dual-layer quartz/alumina substrate using surface micromachining techniques.

  3. RF MEMS reconfigurable triangular patch antenna.

    SciTech Connect

    Christodoulou, Christos George; Nordquist, Christopher Daniel; Feldner, Lucas Matthew

    2005-07-01

    A Ka-band RF MEMS enabled frequency reconfigurable triangular microstrip patch antenna has been designed for monolithic integration with RF MEMS phase shifters to demonstrate a low-cost monolithic passive electronically scanned array (PESA). This paper introduces our first prototype reconfigurable triangular patch antenna currently in fabrication. The aperture coupled patch antenna is fabricated on a dual-layer quartz/alumina substrate using surface micromachining techniques.

  4. Novel fluidic packaging of gimbal-less MEMS mirrors for increased optical resolution and overall performance

    NASA Astrophysics Data System (ADS)

    Milanovic, Veljko; Kasturi, Abhishek; Yang, James

    2016-05-01

    Gimbal-less two-axis quasistatic MEMS mirrors have the ability to reflect optical beams to arbitrary positions and with arbitrary velocity. This technology has become established in many applications including laser based tracking, 3D scanning, biomedical imaging, free-space communication, and LiDAR. However, for certain defense applications, the total angle × diameter product, or the mirror's effective achievable resolution (θ*D product), has not been large enough to address requirements for agile steering in large fields of regard and with a low diffraction-limited beam divergence. Two key limitations have been the relatively low forces available in electrostatic combdrive actuators and the susceptibility of large-diameter MEMS mirrors to shock and vibrations. In this work, we demonstrate that these same MEMS mirrors can have dramatically increased performance when fully immersed and packaged in dielectric liquids with highly favorable torque-increasing, damping-increasing, and optical gain-increasing properties. The rotating electrostatic combdrive has its torque multiplied by liquid's relative permittivity of ~2.5. Furthermore, by selecting the appropriate fluid viscosity, quality factor of the device is reduced and structural damping is tuned to near critical damping. Finally, the increased scan angle due to the ~1.5-1.7 index of refraction of the fluid is an additional benefit. These numerous benefits of the fluidic packaging enabled us to double and in some cases triple the previously achieved θ*D product of two-axis quasistatic MEMS mirrors while still maintaining speeds applicable for above mentioned applications. One of the most exciting benefits of the packaging methodologies is that the damping dramatically increases shock and vibration tolerance, which will be tested next.

  5. Characterization of a MEMS deformable mirror by far field intensity evaluation

    NASA Astrophysics Data System (ADS)

    Greiner, Cherry; Finn, Susanna; Choi, Stacey; Doble, Nathan

    2013-03-01

    The performance of an adaptive optics (AO) system is typically measured using the wavefront sensor (WFS). However, another method is to use the point spread function (PSF), which is sensitive to scatter, does not act as a low pass filter and is not dependent on the WFS calibration. We decided to examine the performance of an AO system built for vision science that employed a micromechanical systems (MEMS) based deformable mirror (DM). Specifically, the MEMS DM consists of 489 actuators, resulting in 163 segments each with individual piston/tip/tilt control. Initial evaluation of the DM with a model eye included determining the ability of the DM to generate individual Zernike polynomials and evaluating the far field PSF to measure wavefront correction performance. For individual Zernike polynomial terms, the DM was found to be capable of correcting the aberration magnitudes expected from previously published human population studies.1, 2 Finally, the DM was used in an AO fundus camera to successfully acquire images of cone photoreceptors in a living human eye. This is part of ongoing work which will incorporate the MEMS DM into both an AO scanning laser ophthalmoscope (SLO) and an AO optical coherence tomography (OCT) system where the form of the PSF at the confocal pinhole/optical fiber is important for optimal imaging.

  6. Cantilever RF-MEMS for monolithic integration with phased array antennas on a PCB

    NASA Astrophysics Data System (ADS)

    Aguilar-Armenta, C. J.; Porter, S. J.

    2015-12-01

    This article presents the development and operation of a novel electrostatic metal-to-metal contact cantilever radio-frequency microelectromechanical system (RF-MEMS) switch for monolithic integration with microstrip phased array antennas (PAAs) on a printed circuit board. The switch is fabricated using simple photolithography techniques on a Rogers 4003c substrate, with a footprint of 200 µm × 100 µm, based on a 1 µm-thick copper cantilever. An alternative wet-etching technique for effectively releasing the cantilever is described. Electrostatic and electromagnetic measurements show that the RF-MEMS presents an actuation voltage of 90 V for metal-to-metal contact, an isolation of -8.7 dB, insertion loss of -2.5 dB and a return loss of -15 dB on a 50 Ω microstrip line at 12.5 GHz. For proof-of-concept, a beam-steering 2 × 2 microstrip PAA, based on two 1-bit phase shifters suitable for the monolithic integration of the RF-MEMS, has been designed and measured at 12.5 GHz. Measurements show that the beam-steering system presents effective radiation characteristics with scanning capabilities from broadside towards 29° in the H-plane.

  7. Light-Driven Polymeric Bimorph Actuators

    NASA Technical Reports Server (NTRS)

    Adamovsky, Gregory; Sarkisov, Sergey S.; Curley, Michael J.

    2009-01-01

    Light-driven polymeric bimorph actuators are being developed as alternatives to prior electrically and optically driven actuators in advanced, highly miniaturized devices and systems exemplified by microelectromechanical systems (MEMS), micro-electro-optical-mechanical systems (MEOMS), and sensor and actuator arrays in smart structures. These light-driven polymeric bimorph actuators are intended to satisfy a need for actuators that (1) in comparison with the prior actuators, are simpler and less power-hungry; (2) can be driven by low-power visible or mid-infrared light delivered through conventional optic fibers; and (3) are suitable for integration with optical sensors and multiple actuators of the same or different type. The immediate predecessors of the present light-driven polymeric bimorph actuators are bimorph actuators that exploit a photorestrictive effect in lead lanthanum zirconate titanate (PLZT) ceramics. The disadvantages of the PLZT-based actuators are that (1) it is difficult to shape the PLZT ceramics, which are hard and brittle; (2) for actuation, it is necessary to use ultraviolet light (wavelengths < 380 nm), which must be generated by use of high-power, high-pressure arc lamps or lasers; (3) it is difficult to deliver sufficient ultraviolet light through conventional optical fibers because of significant losses in the fibers; (4) the response times of the PLZT actuators are of the order of several seconds unacceptably long for typical applications; and (5) the maximum mechanical displacements of the PLZT-based actuators are limited to those characterized by low strains beyond which PLZT ceramics disintegrate because of their brittleness. The basic element of a light-driven bimorph actuator of the present developmental type is a cantilever beam comprising two layers, at least one of which is a polymer that exhibits a photomechanical effect (see figure). The dominant mechanism of the photomechanical effect is a photothermal one: absorption of

  8. Piston-Driven Fluid Ejectors In Silicon Mems

    DOEpatents

    Galambos, Paul C.; Benavides, Gilbert L.; Jokiel, Jr., Bernhard; Jakubczak II, Jerome F.

    2005-05-03

    A surface-micromachined fluid-ejection apparatus is disclosed which utilizes a piston to provide for the ejection of jets or drops of a fluid (e.g. for ink-jet printing). The piston, which is located at least partially inside a fluid reservoir, is moveable into a cylindrical fluid-ejection chamber connected to the reservoir by a microelectromechanical (MEM) actuator which is located outside the reservoir. In this way, the reservoir and fluid-ejection chamber can be maintained as electric-field-free regions thereby allowing the apparatus to be used with fluids that are electrically conductive or which may react or break down in the presence of a high electric field. The MEM actuator can comprise either an electrostatic actuator or a thermal actuator.

  9. MEMS Applications in Aerodynamic Measurement Technology

    NASA Technical Reports Server (NTRS)

    Reshotko, E.; Mehregany, M.; Bang, C.

    1998-01-01

    Microelectromechanical systems (MEMS) embodies the integration of sensors, actuators, and electronics on a single substrate using integrated circuit fabrication techniques and compatible bulk and surface micromachining processes. Silicon and its derivatives form the material base for the MEMS technology. MEMS devices, including microsensors and microactuators, are attractive because they can be made small (characteristic dimension about 100 microns), be produced in large numbers with uniform performance, include electronics for high performance and sophisticated functionality, and be inexpensive. For aerodynamic measurements, it is preferred that sensors be small so as to approximate measurement at a point, and in fact, MEMS pressure sensors, wall shear-stress sensors, heat flux sensors and micromachined hot wires are nearing application. For the envisioned application to wind tunnel models, MEMS sensors can be placed on the surface or in very shallow grooves. MEMS devices have often been fabricated on stiff, flat silicon substrates, about 0.5 mm thick, and therefore were not easily mounted on curved surfaces. However, flexible substrates are now available and heat-flux sensor arrays have been wrapped around a curved turbine blade. Electrical leads can also be built into the flexible substrate. Thus MEMS instrumented wind tunnel models do not require deep spanwise grooves for tubes and leads that compromise the strength of conventionally instrumented models. With MEMS, even the electrical leads can potentially be eliminated if telemetry of the signals to an appropriate receiver can be implemented. While semiconductor silicon is well known for its electronic properties, it is also an excellent mechanical material for MEMS applications. However, silicon electronics are limited to operations below about 200 C, and silicon's mechanical properties start to diminish above 400 C. In recent years, silicon carbide (SiC) has emerged as the leading material candidate for

  10. PolyMEMS Actuator: A Polymer-Based Microelectromechanical (MEMS) Actuator with Macroscopic Action

    DTIC Science & Technology

    2002-09-01

    Polymer Microactuator Array with Macroscopic Force and Displacement.” Cleopatra Cabuz, Robert Horning, William Herb. Issued 6 Feb. 2001. U.S. Patent...6,255,758. “Polymer Microactuator Array with Macroscopic Force and Displacement.” Cleopatra Cabuz, Robert Horning, William Herb. Issued 3 July

  11. Modeling of two-hot-arm horizontal thermal actuator

    NASA Astrophysics Data System (ADS)

    Yan, Dong; Khajepour, Amir; Mansour, Raafat

    2003-03-01

    Electrothermal actuators have a very promising future in MEMS applications since they can generate large deflection and force with low actuating voltages and small device areas. In this study, a lumped model of a two-hot-arm horizontal thermal actuator is presented. In order to prove the accuracy of the lumped model, finite element analysis (FEA) and experimental results are provided. The two-hot-arm thermal actuator has been fabricated using the MUMPs process. Both the experimental and FEA results are in good agreement with the results of lumped modeling.

  12. Through-wafer interrogation of microstructure motion for MEMS feedback control

    NASA Astrophysics Data System (ADS)

    Dawson, Jeremy M.; Chen, Jingdong; Brown, Kolin S.; Famouri, Parviz F.; Hornak, Lawrence A.

    1999-09-01

    Closed-loop MEMS control enables mechanical microsystems to adapt to the demands of the environment which they are actuating opening a new window of opportunity for future MEMS applications. Planar diffractive optical microsystems have the potential to enable the integrated optical interrogation of MEMS microstructure position fully decoupled from the means of mechanical actuation which is central to realization of feedback control. This paper presents the results of initial research evaluating through-wafer optical microsystems for MEMS integrated optical monitoring. Positional monitoring results obtained from a 1.3 micrometer wavelength through- wafer free-space optical probe of a lateral comb resonator fabricated using the Multi-User MEMS Process Service (MUMPS) are presented. Given the availability of positional information via probe signal feedback, a simulation of the application of nonlinear sliding control is presented illustrating position control of the lateral comb resonator structure.

  13. Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement

    DOEpatents

    Rodgers, M. Steven; Miller, Samuel L.

    2003-01-01

    A compact electrostatic actuator is disclosed for microelectromechanical (MEM) applications. The actuator utilizes stationary and moveable electrodes, with the stationary electrodes being formed on a substrate and the moveable electrodes being supported above the substrate on a frame. The frame provides a rigid structure which allows the electrostatic actuator to be operated at high voltages (up to 190 Volts) to provide a relatively large actuation force compared to conventional electrostatic comb actuators which are much larger in size. For operation at its maximum displacement, the electrostatic actuator is relatively insensitive to the exact value of the applied voltage and provides a self-limiting displacement.

  14. Demonstration of Vibrational Braille Code Display Using Large Displacement Micro-Electro-Mechanical Systems Actuators

    NASA Astrophysics Data System (ADS)

    Watanabe, Junpei; Ishikawa, Hiroaki; Arouette, Xavier; Matsumoto, Yasuaki; Miki, Norihisa

    2012-06-01

    In this paper, we present a vibrational Braille code display with large-displacement micro-electro-mechanical systems (MEMS) actuator arrays. Tactile receptors are more sensitive to vibrational stimuli than to static ones. Therefore, when each cell of the Braille code vibrates at optimal frequencies, subjects can recognize the codes more efficiently. We fabricated a vibrational Braille code display that used actuators consisting of piezoelectric actuators and a hydraulic displacement amplification mechanism (HDAM) as cells. The HDAM that encapsulated incompressible liquids in microchambers with two flexible polymer membranes could amplify the displacement of the MEMS actuator. We investigated the voltage required for subjects to recognize Braille codes when each cell, i.e., the large-displacement MEMS actuator, vibrated at various frequencies. Lower voltages were required at vibration frequencies higher than 50 Hz than at vibration frequencies lower than 50 Hz, which verified that the proposed vibrational Braille code display is efficient by successfully exploiting the characteristics of human tactile receptors.

  15. Electromechanical actuators

    NASA Technical Reports Server (NTRS)

    Bigham, J.

    1982-01-01

    Materials illustrating a presentation on the development of electromechanical actuators (EMA) for electric flight systems are presented. Technology issues are identified, and major steps relative to EMA development, NASA's role, and a technology procurement plan are outlined.

  16. MEMS- and NEMS-based smart devices and systems

    NASA Astrophysics Data System (ADS)

    Varadan, Vijay K.

    2001-11-01

    The microelectronics industry has seen explosive growth during the last thirty years. Extremely large markets for logic and memory devices have driven the development of new materials, and technologies for the fabrication of even more complex devices with features sized now don at the sub micron and nanometer level. Recent interest has arisen in employing these materials, tools and technologies for the fabrication of miniature sensors and actuators and their integration with electronic circuits to produce smart devices and systems. This effort offers the promise of: 1) increasing the performance and manufacturability of both sensors and actuators by exploiting new batch fabrication processes developed including micro stereo lithographic an micro molding techniques; 2) developing novel classes of materials and mechanical structures not possible previously, such as diamond like carbon, silicon carbide and carbon nanotubes, micro-turbines and micro-engines; 3) development of technologies for the system level and wafer level integration of micro components at the nanometer precision, such as self-assembly techniques and robotic manipulation; 4) development of control and communication systems for MEMS devices, such as optical and RF wireless, and power delivery systems, etc. A novel composite structure can be tailored by functionalizing carbon nano tubes and chemically bonding them with the polymer matrix e.g. block or graft copolymer, or even cross-linked copolymer, to impart exceptional structural, electronic and surface properties. Bio- and Mechanical-MEMS devices derived from this hybrid composite provide a new avenue for future smart systems. The integration of NEMS (NanoElectroMechanical Systems), MEMS, IDTs (Interdigital Transducers) and required microelectronics and conformal antenna in the multifunctional smart materials and composites results in a smart system suitable for sensing and control of a variety functions in automobile, aerospace, marine and civil

  17. Actuators Based on Liquid Crystalline Elastomer Materials

    PubMed Central

    Jiang, Hongrui; Li, Chensha; Huang, Xuezhen

    2013-01-01

    Liquid crystalline elastomers (LCEs) exhibit a number of remarkable physical effects, including the unique, high-stroke reversible mechanical actuation when triggered by external stimuli. This article reviews some recent exciting developments in the field of LCEs materials with an emphasis on their utilization in actuator applications. Such applications include artificial muscles, industrial manufacturing, health and microelectromechanical systems (MEMS). With suitable synthetic and preparation pathways and well-controlled actuation stimuli, such as heat, light, electric and magnetic field, excellent physical properties of LCE materials can be realized. By comparing the actuating properties of different systems, general relationships between the structure and the property of LCEs are discussed. How these materials can be turned into usable devices using interdisciplinary techniques is also described. PMID:23648966

  18. Fabrication processes for MEMS deformable mirrors in the next generation telescope instruments

    NASA Astrophysics Data System (ADS)

    Diouf, Alioune

    This dissertation advances three critical technology areas at the frontier of research for micro electro-mechanical systems (MEMS) deformable minors (DMs) needed for next generation telescopes (NGTs). High actuator-count MEMS deformable minors are needed for future ground-based large astronomical telescopes. Scaling up the current MEMS DMs to unprecedented numbers of independent actuators---up to 10,000 on a single DM---will require new electrical connection architecture for the actuators in order to replace the wire-bonded scheme that has been used to date. A through-wafer via interconnection fabrication process for MEMS DMs is developed to offer a path to transform the frontier of high actuator count MEMS micromirrors. In a class of NGTs instrument known as the Multi-Object Adaptive Optics (MOAO), the correction made by the DM of the wavefront phase error over the entire telescope field view is not accessible to the sensing unit. To achieve compensation, precise, single step "open-loop" commands must be developed for the DM. Due to the nonlinear relationship between applied voltage and actuation displacement at each actuator, and the mechanical coupling among actuators through the mirror membrane, such open-loop control is a formidable task. A combination of mirror surface modeling and sparse actuator empirical calibration is used to demonstrate open-loop control of MEMS deformable minors to the accuracy of closed-loop control over the entire available DM stroke. Shapes at the limit of achievable minor spatial frequencies with up to 2.5microm amplitudes have been achieved within 20nm RMS error accuracy of closed-loop control. The calibration of a single actuator to be used for predicting shapes results in an additional 14nm RMS surface error compared to parallel calibration of all actuators in the deformable minor. The ubiquitous reflective coatings for MEMS deformable minors are gold and aluminum. Emerging adaptive optics application require broadband optical

  19. MEMS reliability in shock environments

    SciTech Connect

    TANNER,DANELLE M.; WALRAVEN,JEREMY A.; HELGESEN,KAREN SUE; IRWIN,LLOYD W.; BROWN,FREDERICK A.; SMITH,NORMAN F.; MASTERS,NATHAN

    2000-02-09

    In order to determine the susceptibility of the MEMS (MicroElectroMechanical Systems) devices to shock, tests were performed using haversine shock pulses with widths of 1 to 0.2 ms in the range from 500g to 40,000g. The authors chose a surface-micromachined microengine because it has all the components needed for evaluation: springs that flex, gears that are anchored, and clamps and spring stops to maintain alignment. The microengines, which were unpowered for the tests, performed quite well at most shock levels with a majority functioning after the impact. Debris from the die edges moved at levels greater than 4,000g causing shorts in the actuators and posing reliability concerns. The coupling agent used to prevent stiction in the MEMS release weakened the die-attach bond, which produced failures at 10,000g and above. At 20,000g the authors began to observe structural damage in some of the thin flexures and 2.5-micron diameter pin joints. The authors observed electrical failures caused by the movement of debris. Additionally, they observed a new failure mode where stationary comb fingers contact the ground plane resulting in electrical shorts. These new failure were observed in the control group indicating that they were not shock related.

  20. Calibration of High Frequency MEMS Microphones

    NASA Technical Reports Server (NTRS)

    Shams, Qamar A.; Humphreys, William M.; Bartram, Scott M.; Zuckewar, Allan J.

    2007-01-01

    Understanding and controlling aircraft noise is one of the major research topics of the NASA Fundamental Aeronautics Program. One of the measurement technologies used to acquire noise data is the microphone directional array (DA). Traditional direction array hardware, consisting of commercially available condenser microphones and preamplifiers can be too expensive and their installation in hard-walled wind tunnel test sections too complicated. An emerging micro-machining technology coupled with the latest cutting edge technologies for smaller and faster systems have opened the way for development of MEMS microphones. The MEMS microphone devices are available in the market but suffer from certain important shortcomings. Based on early experiments with array prototypes, it has been found that both the bandwidth and the sound pressure level dynamic range of the microphones should be increased significantly to improve the performance and flexibility of the overall array. Thus, in collaboration with an outside MEMS design vendor, NASA Langley modified commercially available MEMS microphone as shown in Figure 1 to meet the new requirements. Coupled with the design of the enhanced MEMS microphones was the development of a new calibration method for simultaneously obtaining the sensitivity and phase response of the devices over their entire broadband frequency range. Over the years, several methods have been used for microphone calibration. Some of the common methods of microphone calibration are Coupler (Reciprocity, Substitution, and Simultaneous), Pistonphone, Electrostatic actuator, and Free-field calibration (Reciprocity, Substitution, and Simultaneous). Traditionally, electrostatic actuators (EA) have been used to characterize air-condenser microphones for wideband frequency ranges; however, MEMS microphones are not adaptable to the EA method due to their construction and very small diaphragm size. Hence a substitution-based, free-field method was developed to

  1. Direct integration of MEMS, dielectric pumping and cell manipulation with reversibly bonded gecko adhesive microfluidics

    NASA Astrophysics Data System (ADS)

    Warnat, S.; King, H.; Wasay, A.; Sameoto, D.; Hubbard, T.

    2016-09-01

    We present an approach to form a microfluidic environment on top of MEMS dies using reversibly bonded microfluidics. The reversible polymeric microfluidics moulds bond to the MEMS die using a gecko-inspired gasket architecture. In this study the formed microchannels are demonstrated in conjunction with a MEMS mechanical single cell testing environment for BioMEMS applications. A reversible microfluidics placement technique with an x-y and rotational accuracy of  ±2 µm and 1° respectively on a MEMS die was developed. No leaks were observed during pneumatic pumping of common cell media (PBS, sorbitol, water, seawater) through the fluidic channels. Thermal chevron actuators were successful operated inside this fluidic environment and a performance deviation of ~15% was measured compared to an open MEMS configuration. Latex micro-spheres were pumped using traveling wave di-electrophoresis and compared to an open (no-microfluidics) configuration with velocities of 24 µm s-1 and 20 µm s-1.

  2. Characterizing the potential of MEMS deformable mirrors for astronomical adaptive optics

    NASA Astrophysics Data System (ADS)

    Morzinski, Katie M.; Evans, Julia W.; Severson, Scott; Macintosh, Bruce; Dillon, Daren; Gavel, Don; Max, Claire; Palmer, Dave

    2006-06-01

    Current high-contrast "extreme" adaptive optics (ExAO) systems are partially limited by deformable mirror technology. Mirror requirements specify thousands of actuators, all of which must be functional within the clear aperture, and which give nanometer flatness yet micron stroke when operated in closed loop.1 Micro-electrical mechanical-systems (MEMS) deformable mirrors have been shown to meet ExAO actuator yield, wavefront error, and cost considerations. This study presents the performance of Boston Micromachines' 1024-actuator continuous-facesheet MEMS deformable mirrors under tests for actuator stability, position repeatability, and practical operating stroke. To explore whether MEMS actuators are susceptible to temporal variation, a series of long-term stability experiments were conducted. Each actuator was held fixed and the motion over 40 minutes was measured. The median displacement of all the actuators tested was 0.08 nm surface, inclusive of system error. MEMS devices are also appealing for adaptive optics architectures based on open-loop correction. In experiments of actuator position repeatability, 100% of the tested actuators returned repeatedly to their starting point with a precision of < 1 nm surface. Finally, MEMS devices were tested for maximum stroke achieved under application of spatially varying one-dimensional sinusoids. Given a specified amplitude in voltage, the measured stroke was 1 μm surface at the low spatial frequencies, decreasing to 0.2 μm surface for the highest spatial frequency. Stroke varied somewhat linearly as inverse spatial frequency, with a flattening in the relation at the high spatial frequency end.

  3. MEMS tactile display: from fabrication to characterization

    NASA Astrophysics Data System (ADS)

    Miki, Norihisa; Kosemura, Yumi; Watanabe, Junpei; Ishikawa, Hiroaki

    2014-03-01

    We report fabrication and characterization of MEMS-based tactile display that can display users various tactile information, such as Braille codes and surface textures. The display consists of 9 micro-actuators that are equipped with hydraulic displacement amplification mechanism (HDAM) to achieve large enough displacement to stimulate the human tactile receptors. HDAM encapsulates incompressible liquids. We developed a liquid encapsulation process, which we termed as Bonding-in-Liquid Technique, where bonding with a UV-curable resin in glycerin is conducted in the liquid, which prevented interfusion of air bubbles and deformation of the membrane during the bonding. HDAM successfully amplified the displacement generated by piezoelectric actuators by a factor of 6. The display could virtually produce "rough" and "smooth" surfaces, by controlling the vibration frequency, displacement, and the actuation periods of an actuator until the adjacent actuator was driven. We introduced a sample comparison method to characterize the surfaces, which involves human tactile sensation. First, we prepared samples whose mechanical properties are known. We displayed a surface texture to the user by controlling the parameters and then, the user selects a sample that has the most similar surface texture. By doing so, we can correlate the parameters with the mechanical properties of the sample as well as find the sets of the parameters that can provide similar tactile information to many users. The preliminary results with respect to roughness and hardness is presented.

  4. Differentially-driven MEMS spatial light modulator

    DOEpatents

    Stappaerts, Eddy A.

    2004-09-14

    A MEMS SLM and an electrostatic actuator associated with a pixel in an SLM. The actuator has three electrodes: a lower electrode; an upper electrode fixed with respect to the lower electrode; and a center electrode suspended and actuable between the upper and lower electrodes. The center electrode is capable of resiliently-biasing to restore the center electrode to a non-actuated first equilibrium position, and a mirror is operably connected to the center electrode. A first voltage source provides a first bias voltage across the lower and center electrodes and a second voltage source provides a second bias voltage across the upper and center electrodes, with the first and second bias voltages determining the non-actuated first equilibrium position of the center electrode. A third voltage source provides a variable driver voltage across one of the lower/center and upper/center electrode pairs in series with the corresponding first or second bias voltage, to actuate the center electrode to a dynamic second equilibrium position.

  5. New technologies for the actuation and controls of large aperture lightweight quality mirrors

    NASA Technical Reports Server (NTRS)

    Lih, S. S.; Yang, E. H.; Gullapalli, S. N.; Flood, R.

    2003-01-01

    This paper presents a set of candidate components: MEMS based large stroke (>100 microns) ultra lightweight (0.01 gm) discrete inch worm actuator technology, and a distributed actuator technology, in the context of a novel lightweight active flexure-hinged substrate concept that uses the nanolaminate face sheet.

  6. Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type

    PubMed Central

    Tsai, Cheng-Hua; Tsai, Chun-Wei; Chang, Hsu-Tang; Liu, Shih-Hsiang; Tsai, Jui-Che

    2015-01-01

    Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively. PMID:26110409

  7. Short-wavelength MEMS-tunable VCSELs.

    PubMed

    Cole, Garrett D; Behymer, Elaine; Bond, Tiziana C; Goddard, Lynford L

    2008-09-29

    We present electrically-injected MEMS-tunable vertical-cavity surface-emitting lasers with emission wavelengths below 800 nm. Operation in this wavelength range, near the oxygen A-band from 760-780 nm, is attractive for absorption-based optical gas sensing. These fully-monolithic devices are based on an oxide-aperture AlGaAs epitaxial structure and incorporate a suspended dielectric Bragg mirror for wavelength tuning. By implementing electrostatic actuation, we demonstrate the potential for tuning rates up to 1 MHz, as well as a wide wavelength tuning range of 30 nm (767-737 nm).

  8. A MEMS Micro-Translation Stage with Long Linear Translation

    NASA Technical Reports Server (NTRS)

    Ferguson, Cynthia K.; English, J. M.; Nordin, G. P.; Ashley, P. R.; Abushagur, M. A. G.

    2004-01-01

    A MEMS Micro-Translation Stage (MTS) actuator concept has been developed that is capable of traveling long distances, while maintaining low power, low voltage, and accuracy as required by many applications, including optical coupling. The Micro-Translation Stage (MTS) uses capacitive electrostatic forces in a linear motor application, with stationary stators arranged linearly on both sides of a channel, and matching rotors on a moveable shuttle. This creates a force that allows the shuttle to be pulled along the channel. It is designed to carry 100 micron-sized elements on the top surface, and can travel back and forth in the channel, either in a stepping fashion allowing many interim stops, or it can maintain constant adjustable speeds for a controlled scanning motion. The MTS travel range is limited only by the size of the fabrication wafer. Analytical modeling and simulations were performed based on the fabrication process, to assure the stresses, friction and electrostatic forces were acceptable to allow successful operation of this device. The translation forces were analyzed to be near 0.5 micron N, with a 300 micron N stop-to-stop time of 11.8 ms.

  9. Close Up - Mem Fox.

    ERIC Educational Resources Information Center

    Moss, Barbara

    2003-01-01

    Presents an interview with Mem Fox, a teacher educator and children's book author well known throughout the world. Discusses writing books for children, and the mistakes she made early in her career as a writer. Notes that Mem is a tireless advocate for meaningful literacy instruction, and her "Radical Reflections: Passionate Opinions on Teaching,…

  10. Inertial MEMS System Applications

    DTIC Science & Technology

    2010-03-01

    Inertial MEMS System Applications N. Barbour, R. Hopkins, A. Kourepenis, P. Ward The Charles Stark Draper Laboratory (P-4993) 555 Technology...driven by gun-launched projectile requirements. The application of silicon MEMS inertial technology to competent munitions efforts began in the early...requirements. These applications have a unique combination of requirements including, performance over temperature, high-g launch survivability, fast

  11. Performance of a MEMS-base Adaptive Optics Optical Coherency Tomography System

    SciTech Connect

    Evans, J; Zadwadzki, R J; Jones, S; Olivier, S; Opkpodu, S; Werner, J S

    2008-01-16

    We have demonstrated that a microelectrical mechanical systems (MEMS) deformable mirror can be flattened to < 1 nm RMS within controllable spatial frequencies over a 9.2-mm aperture making it a viable option for high-contrast adaptive optics systems (also known as Extreme Adaptive Optics). The Extreme Adaptive Optics Testbed at UC Santa Cruz is being used to investigate and develop technologies for high-contrast imaging, especially wavefront control. A phase shifting diffraction interferometer (PSDI) measures wavefront errors with sub-nm precision and accuracy for metrology and wavefront control. Consistent flattening, required testing and characterization of the individual actuator response, including the effects of dead and low-response actuators. Stability and repeatability of the MEMS devices was also tested. An error budget for MEMS closed loop performance will summarize MEMS characterization.

  12. Displacement damage effects in silicon MEMS at high proton doses

    NASA Astrophysics Data System (ADS)

    Gomes, João; Shea, Herbert R.

    2011-02-01

    We report on a study of the sensitivity of silicon MEMS to proton radiation and mitigation strategies. MEMS can degrade due to ionizing radiation (electron-hole pair creation) and non-ionizing radiation (displacement damage), such as electrons, trapped and solar protons, or cosmic rays, typically found in a space environment. Over the past few years there has been several reports on the effects of ionizing radiation in silicon MEMS, with failure generally linked to trapped charge in dielectrics. However there is near complete lack of studies on displacement damage effects in silicon- MEMS: how does silicon change mechanically due to proton irradiation? We report on an investigation on the susceptibility of 50 μm thick SOI-based MEMS resonators to displacement damages due to proton beams, with energies from 1 to 60 MeV, and annealing of this damage. We measure ppm changes on the Young's modulus and Poisson ratio by means of accurately monitoring the resonant frequency of devices in vacuum using a Laser Doppler Vibrometer. We observed for the first time an increase (up to 0.05%) of the Young's modulus of single-crystal silicon electromagnetically-actuated micromirrors after exposure to low energy protons (1-4 MeV) at high absorbed doses ~ 100 Mrad (Si). This investigation will contribute to a better understanding of the susceptibility of silicon-based MEMS to displacement damages frequently encountered in a space radiation environment, and allow appropriated design margin and shielding to be implemented.

  13. Muscular MEMS—the engineering of liquid crystal elastomer actuators

    NASA Astrophysics Data System (ADS)

    Petsch, S.; Khatri, B.; Schuhladen, S.; Köbele, L.; Rix, R.; Zentel, R.; Zappe, H.

    2016-08-01

    A new class of soft-matter actuator, the liquid crystal elastomer (LCE), shows promise for application in a wide variety of mechanical microsystems. Frequently referred to as an ‘artificial muscle’, this family of materials exhibits large actuation stroke and generates considerable force, in a compact form which may easily be combined with the structures and devices commonly used in microsystems and MEMS. We show here how standard microfabrication techniques may be used to integrate LCEs into mechanical microsystems and present an in-depth analysis of their mechanical and actuation properties. Using an example from micro-optics and optical MEMS, we demonstrate that their performance and flexibility allows realization of entirely new types of tunable optical functionality.

  14. Modular droplet actuator drive

    NASA Technical Reports Server (NTRS)

    Pollack, Michael G. (Inventor); Paik, Philip (Inventor)

    2011-01-01

    A droplet actuator drive including a detection apparatus for sensing a property of a droplet on a droplet actuator; circuitry for controlling the detection apparatus electronically coupled to the detection apparatus; a droplet actuator cartridge connector arranged so that when a droplet actuator cartridge electronically is coupled thereto: the droplet actuator cartridge is aligned with the detection apparatus; and the detection apparatus can sense the property of the droplet on a droplet actuator; circuitry for controlling a droplet actuator coupled to the droplet actuator connector; and the droplet actuator circuitry may be coupled to a processor.

  15. Miniature Inchworm Actuators Fabricated by Use of LIGA

    NASA Technical Reports Server (NTRS)

    Yang, Eui-Hyeok

    2003-01-01

    Miniature inchworm actuators that would have relatively simple designs have been proposed for applications in which there are requirements for displacements of the order of microns or tens of microns and for the ability to hold their positions when electric power is not applied. The proposed actuators would be members of the class of microelectromechanical systems (MEMS), but would be designed and fabricated following an approach that is somewhat unusual for MEMS. Like other MEMS actuators, the proposed inchworm actuators could utilize thermoplastic, bimetallic, shape-memory-alloy, or piezoelectric actuation principles. The figure depicts a piezoelectric inchworm actuator according to the proposal. As in other inchworm actuators, linear motion of an extensible member would be achieved by lengthening and shortening the extensible member in synchronism with alternately clamping and releasing one and then the other end of the member. In this case, the moving member would be the middle one; the member would be piezoelectric and would be shortened by applying a voltage to it. The two outer members would also be piezoelectric; the release of the clamps on the upper or lower end would be achieved by applying a voltage to the electrodes on the upper or lower ends, respectively, of these members. Usually, MEMS actuators cannot be fabricated directly on the side walls of silicon wafers, yet the geometry of this actuator necessitates such fabrication. The solution, according to the proposal, would be to use the microfabrication technique known by the German acronym LIGA - "lithographie, galvanoformung, abformung," which means lithography, electroforming, molding. LIGA involves x-ray lithography of a polymer film followed by selective removal of material to form a three-dimensional pattern from which a mold is made. Among the advantages of LIGA for this purpose are that it is applicable to a broad range of materials, can be used to implement a variety of designs, including

  16. The DeMi CubeSat: Wavefront Control with a MEMS Deformable Mirror in Space

    NASA Astrophysics Data System (ADS)

    Douglas, Ewan S.; Bendek, Eduardo; Marinan, Anne; Belikov, Ruslan; Merck, John; Cahoy, Kerri Lynn

    2017-01-01

    High-contrast imaging instruments on future space telescopes will require precise wavefront correction to detect small exoplanets near their host stars. High-actuator count microelectromechanical system (MEMS) deformable mirrors provide a compact form of wavefront control. The 6U DeMi CubeSat will demonstrate wavefront control with a MEMS deformable mirror over a yearlong mission. The payload includes both an internal laser source and a small telescope, with both focal plane and pupil plane sensing, for deformable mirror characterization. We detail the DeMi payload design, and describe future astrophysics enabled by high-actuator count deformable mirrors and small satellites.

  17. Composite thermal micro-actuator array for tactile displays

    NASA Astrophysics Data System (ADS)

    Enikov, Eniko T.; Lazarov, Kalin V.

    2003-07-01

    Tactile perception of complex symbols through tactile stimulation is an exciting application of a phenomenon known as tactile illusion (TI). Sensation of motion on the skin can be produced by a limited number of discrete mechanical actuators applying light pressure over the skin. This phenomenon can thus be used as a neurophysiological testing tool to determine central and peripheral nervous system injury as well as providing an additional human-machine communication channel. This paper describes the development of a 4 x 5 actuator array of individual vibrating pixels for fingertip tactile communication. The array is approximately one square centimeter and utilizes novel micro-clutch MEMS technology. The individual pixels are turned ON and OFF by pairs of microscopic composite thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. The physiological parameters required for inducing tactile illusion are described. The fabrication sequence for the thermal micro-actuators along with actuation results are also presented.

  18. Variable Emissivity Through MEMS Technology

    NASA Technical Reports Server (NTRS)

    Darrin, Ann Garrison; Osiander, Robert; Champion, John; Swanson, Ted; Douglas, Donya; Grob, Lisa M.; Powers, Edward I. (Technical Monitor)

    2000-01-01

    This paper discusses a new technology for variable emissivity (vari-e) radiator surfaces, which has significant advantages over traditional radiators and promises an alternative design technique for future spacecraft thermal control systems. All spacecraft rely on radiative surfaces to dissipate waste heat. These radiators have special coatings, typically with a low solar absorptivity and a high infrared-red emissivity, that are intended to optimize performance under the expected heat load and thermal sink environment. The dynamics of the heat loads and thermal environment make it a challenge to properly size the radiator and often require some means of regulating the heat rejection rate of the radiators in order to achieve proper thermal balance. Specialized thermal control coatings, which can passively or actively adjust their emissivity offer an attractive solution to these design challenges. Such systems would allow intelligent control of the rate of heat loss from a radiator in response to heat load and thermal environmental variations. Intelligent thermal control through variable emissivity systems is well suited for nano and pico spacecraft applications where large thermal fluctuations are expected due to the small thermal mass and limited electric resources. Presently there are three different types of vari-e technologies under development: Micro ElectroMechanical Systems (MEMS) louvers, Electrochromic devices, and Electrophoretic devices. This paper will describe several prototypes of micromachined (MEMS) louvers and experimental results for the emissivity variations measured on theses prototypes. It will further discuss possible actuation mechanisms and space reliability aspects for different designs. Finally, for comparison parametric evaluations of the thermal performances of the new vari-e technology and standard thermal control systems are presented in this paper.

  19. The use of a high-order MEMS deformable mirror in the Gemini Planet Imager

    SciTech Connect

    Poyneer, L A; Bauman, B; Cornelissen, S; Jones, S; Macintosh, B; Palmer, D; Isaacs, J

    2010-12-17

    We briefly review the development history of the Gemini Planet Imager's 4K Boston Micromachines MEMS deformable mirror. We discuss essential calibration steps and algorithms to control the MEMS with nanometer precision, including voltage-phase calibration and influence function characterization. We discuss the integration of the MEMS into GPI's Adaptive Optics system at Lawrence Livermore and present experimental results of 1.5 kHz closed-loop control. We detail mitigation strategies in the coronagraph to reduce the impact of abnormal actuators on final image contrast.

  20. Packaging of MEMS microphones

    NASA Astrophysics Data System (ADS)

    Feiertag, Gregor; Winter, Matthias; Leidl, Anton

    2009-05-01

    To miniaturize MEMS microphones we have developed a microphone package using flip chip technology instead of chip and wire bonding. In this new packaging technology MEMS and ASIC are flip chip bonded on a ceramic substrate. The package is sealed by a laminated polymer foil and by a metal layer. The sound port is on the bottom side in the ceramic substrate. In this paper the packaging technology is explained in detail and results of electro-acoustic characterization and reliability testing are presented. We will also explain the way which has led us from the packaging of Surface Acoustic Wave (SAW) components to the packaging of MEMS microphones.

  1. Low voltage driven RF MEMS capacitive switch using reinforcement for reduced buckling

    NASA Astrophysics Data System (ADS)

    Bansal, Deepak; Bajpai, Anuroop; Kumar, Prem; Kaur, Maninder; Kumar, Amit; Chandran, Achu; Rangra, Kamaljit

    2017-02-01

    Variation in actuation voltage for RF MEMS switches is observed as a result of stress-generated buckling of MEMS structures. Large voltage driven RF-MEMS switches are a major concern in space bound communication applications. In this paper, we propose a low voltage driven RF MEMS capacitive switch with the introduction of perforations and reinforcement. The performance of the fabricated switch is compared with conventional capacitive RF MEMS switches. The pull-in voltage of the switch is reduced from 70 V to 16.2 V and the magnitude of deformation is reduced from 8 µm to 1 µm. The design of the reinforcement frame enhances the structural stiffness by 46 % without affecting the high frequency response of the switch. The measured isolation and insertion loss of the reinforced switch is more than 20 dB and 0.4 dB over the X band range.

  2. Thermoelectric microdevice fabricated by a MEMS-like electrochemical process

    NASA Technical Reports Server (NTRS)

    Snyder, G. Jeffrey; Lim, James R.; Huang, Chen-Kuo; Fleurial, Jean-Pierre

    2003-01-01

    Microelectromechanical systems (MEMS) are the basis of many rapidly growing technologies, because they combine miniature sensors and actuators with communications and electronics at low cost. Commercial MEMS fabrication processes are limited to silicon-based materials or two-dimensional structures. Here we show an inexpensive, electrochemical technique to build MEMS-like structures that contain several different metals and semiconductors with three-dimensional bridging structures. We demonstrate this technique by building a working microthermoelectric device. Using repeated exposure and development of multiple photoresist layers, several different metals and thermoelectric materials are fabricated in a three-dimensional structure. A device containing 126 n-type and p-type (Bi, Sb)2Te3 thermoelectric elements, 20 microm tall and 60 microm in diameter with bridging metal interconnects, was fabricated and cooling demonstrated. Such a device should be of technological importance for precise thermal control when operating as a cooler, and for portable power when operating as a micro power generator.

  3. Thermoelectric microdevice fabricated by a MEMS-like electrochemical process.

    PubMed

    Snyder, G Jeffrey; Lim, James R; Huang, Chen-Kuo; Fleurial, Jean-Pierre

    2003-08-01

    Microelectromechanical systems (MEMS) are the basis of many rapidly growing technologies, because they combine miniature sensors and actuators with communications and electronics at low cost. Commercial MEMS fabrication processes are limited to silicon-based materials or two-dimensional structures. Here we show an inexpensive, electrochemical technique to build MEMS-like structures that contain several different metals and semiconductors with three-dimensional bridging structures. We demonstrate this technique by building a working microthermoelectric device. Using repeated exposure and development of multiple photoresist layers, several different metals and thermoelectric materials are fabricated in a three-dimensional structure. A device containing 126 n-type and p-type (Bi, Sb)2Te3 thermoelectric elements, 20 microm tall and 60 microm in diameter with bridging metal interconnects, was fabricated and cooling demonstrated. Such a device should be of technological importance for precise thermal control when operating as a cooler, and for portable power when operating as a micro power generator.

  4. Optical measurement methods to study dynamic behavior in MEMS

    NASA Astrophysics Data System (ADS)

    Rembe, Christian; Kant, Rishi; Muller, Richard S.

    2001-10-01

    The maturing designs of moving microelectromechanical systems (MEMS) make it more-and-more important to have precise measurements and visual means to characterize dynamic microstructures. The Berkeley Sensor&Actuator Center (BSAC) has a forefront project aimed at developing these capabilities and at providing high-speed Internet (Supernet) access for remote use of its facilities. Already in operation are three optical-characterization tools: a stroboscopic-interferometer system, a computer-microvision system, and a laser-Doppler vibrometer. This paper describes precision and limitations of these systems and discusses their further development. In addition, we describe the results of experimental studies on the different MEMS devices, and give an overview about high-speed visualization of rapidly moving MEMS structures.

  5. Microstereolithography for polymer-based based MEMS

    NASA Astrophysics Data System (ADS)

    Varadan, Vijay K.; Xie, Jining

    2003-07-01

    Microfabrication techniques such as bulk micromachining and surface micromachining currently employed to conceive MEMS are largely derived from the standard IC and microelectronics technology. Even though many MEMS devices with integrated electronics have been achieved by using the traditional micromachining techniques, some limitations have nevertheless to be underlined: 1) these techniques are very expensive and need specific installations as well as a cleanroom environment, 2) the materials that can be used up to now are restricted to silicon and metals, 3) the manufacture of 3D parts having curved surfaces or an important number of layers is not possible. Moreover, for some biological applications, the materials used for sensors must be compatible with human body and the actuators need to have high strain and displacement which the current silicon based MEMS do not provide. It is thus natural for the researchers to 'look' for alternative methods such as Microstereolithography (MSL) to make 3D sensors and actuators using polymeric based materials. For MSL techniques to be successful as their silicon counterparts, one has to come up with multifunctional polymers with electrical properties comparable to silicon. These multifunctional polymers should not only have a high sensing capability but also a high strain and actuation performance. A novel UV-curable polymer uniformly bonded with functionalized nanotubes was synthesized via a modified three-step in-situ polymerization. Purified multi-walled nanotubes, gained from the microwave chemical vapor deposition method, were functionalized by oxidation. The UV curable polymer was prepared from toluene diisocyanate (TDI), functionalized nanotubes, and 2-hydroxyethyl methacrylate (HEMA). The chemical bonds between -NCO groups of TDI and -OH, -COOH groups of functionalized nanotubes help for conceiving polymeric based MEMS devices. A cost effective fabrication techniques was presented using Micro Stereo Lithography and

  6. Feasibility of Biodegradable MEMS Based on Cellulose Paper

    DTIC Science & Technology

    2009-12-16

    402-751 South Korea Tel: +82-32-860-7326, Fax: +82-32-868-1716, Email: jaehwan@inha.ac.kr Goal: Development of biodegradable MEMS is essential...ADDRESS(ES) Inha University,253 Yonghyun-Dong, Nam-Ku,Incheon 402-751, Korea ( South ),KR,402-751 8. PERFORMING ORGANIZATION REPORT NUMBER N/A 9...of sensor and actuator functions on it. Approaches: We intend to develop Piezoelectric Paper that exhibits merits in terms of flexible

  7. Memory metal actuator

    NASA Technical Reports Server (NTRS)

    Ruoff, C. F. (Inventor)

    1985-01-01

    A mechanical actuator can be constructed by employing a plurality of memory metal actuator elements in parallel to control the amount of actuating force. In order to facilitate direct control by digital control signals provided by a computer or the like, the actuating elements may vary in stiffness according to a binary relationship. The cooling or reset time of the actuator elements can be reduced by employing Peltier junction cooling assemblies in the actuator.

  8. MEMS For Wireless Communications

    DTIC Science & Technology

    2002-09-01

    at 5, 10, and 20 MHz. These devices were then delivered to Raytheon TI Systems for vacuum packaging , using a technology they developed under the DARPA...MTO MEMS Pro- gram. After vacuum packaging into DIP packages, dies were sent back to the University of Michigan for final evaluations, then sent out...environment, this grant also investigated vacuum - packaging methods. To be consistent with the bonding approach used for MEMS/transistor merging, and to

  9. COTS MEMS Flow-Measurement Probes

    NASA Technical Reports Server (NTRS)

    Redding, Chip; Smith, Floyd A.; Blank, Greg; Cruzan, Charles

    2004-01-01

    cm) in diameter and could weigh enough that two technicians are needed to handle it. Replacing hard tubing with electronic chips can eliminate much of the bulk. Each sensor would fit on the tip of a 1/16-in. tube with room to spare. The Lucas NovaSensor P592 piezoresistive silicon pressure sensor was chosen for this project because of its cost, availability, and tolerance to extreme ambient conditions. The sensor chip is 1 mm square by 0.6 mm thick (about 0.039 by 0.039 by 0.024 in.) and includes 0.12-mm (approx.=0.005-in.) wire connection tabs. The figure shows a flow-angularity probe that was built by use of three such MEMS chips. It is planned to demonstrate this MEMS probe as an alternative to a standard tube-type "Cobra" probe now used routinely in wind tunnels and aeronautical hardware. This MEMS probe could be translated across a flow field by use of a suitable actuator, so that its accuracy and the shortness of its response time could be exploited to obtain precise dynamic measurements of a sort that cannot be made by use of conventional tubing-based instrumentation.

  10. Uncertainty quantification in capacitive RF MEMS switches

    NASA Astrophysics Data System (ADS)

    Pax, Benjamin J.

    Development of radio frequency micro electrical-mechanical systems (RF MEMS) has led to novel approaches to implement electrical circuitry. The introduction of capacitive MEMS switches, in particular, has shown promise in low-loss, low-power devices. However, the promise of MEMS switches has not yet been completely realized. RF-MEMS switches are known to fail after only a few months of operation, and nominally similar designs show wide variability in lifetime. Modeling switch operation using nominal or as-designed parameters cannot predict the statistical spread in the number of cycles to failure, and probabilistic methods are necessary. A Bayesian framework for calibration, validation and prediction offers an integrated approach to quantifying the uncertainty in predictions of MEMS switch performance. The objective of this thesis is to use the Bayesian framework to predict the creep-related deflection of the PRISM RF-MEMS switch over several thousand hours of operation. The PRISM switch used in this thesis is the focus of research at Purdue's PRISM center, and is a capacitive contacting RF-MEMS switch. It employs a fixed-fixed nickel membrane which is electrostatically actuated by applying voltage between the membrane and a pull-down electrode. Creep plays a central role in the reliability of this switch. The focus of this thesis is on the creep model, which is calibrated against experimental data measured for a frog-leg varactor fabricated and characterized at Purdue University. Creep plasticity is modeled using plate element theory with electrostatic forces being generated using either parallel plate approximations where appropriate, or solving for the full 3D potential field. For the latter, structure-electrostatics interaction is determined through immersed boundary method. A probabilistic framework using generalized polynomial chaos (gPC) is used to create surrogate models to mitigate the costly full physics simulations, and Bayesian calibration and forward

  11. MEMS in Space Systems

    NASA Technical Reports Server (NTRS)

    Lyke, J. C.; Michalicek, M. A.; Singaraju, B. K.

    1995-01-01

    Micro-electro-mechanical systems (MEMS) provide an emerging technology that has the potential for revolutionizing the way space systems are designed, assembled, and tested. The high launch costs of current space systems are a major determining factor in the amount of functionality that can be integrated in a typical space system. MEMS devices have the ability to increase the functionality of selected satellite subsystems while simultaneously decreasing spacecraft weight. The Air Force Phillips Laboratory (PL) is supporting the development of a variety of MEMS related technologies as one of several methods to reduce the weight of space systems and increase their performance. MEMS research is a natural extension of PL research objectives in micro-electronics and advanced packaging. Examples of applications that are under research include on-chip micro-coolers, micro-gyroscopes, vibration sensors, and three-dimensional packaging technologies to integrate electronics with MEMS devices. The first on-orbit space flight demonstration of these and other technologies is scheduled for next year.

  12. Flight control actuation system

    NASA Technical Reports Server (NTRS)

    Wingett, Paul T. (Inventor); Gaines, Louie T. (Inventor); Evans, Paul S. (Inventor); Kern, James I. (Inventor)

    2006-01-01

    A flight control actuation system comprises a controller, electromechanical actuator and a pneumatic actuator. During normal operation, only the electromechanical actuator is needed to operate a flight control surface. When the electromechanical actuator load level exceeds 40 amps positive, the controller activates the pneumatic actuator to offset electromechanical actuator loads to assist the manipulation of flight control surfaces. The assistance from the pneumatic load assist actuator enables the use of an electromechanical actuator that is smaller in size and mass, requires less power, needs less cooling processes, achieves high output forces and adapts to electrical current variations. The flight control actuation system is adapted for aircraft, spacecraft, missiles, and other flight vehicles, especially flight vehicles that are large in size and travel at high velocities.

  13. Flight control actuation system

    NASA Technical Reports Server (NTRS)

    Wingett, Paul T. (Inventor); Gaines, Louie T. (Inventor); Evans, Paul S. (Inventor); Kern, James I. (Inventor)

    2004-01-01

    A flight control actuation system comprises a controller, electromechanical actuator and a pneumatic actuator. During normal operation, only the electromechanical actuator is needed to operate a flight control surface. When the electromechanical actuator load level exceeds 40 amps positive, the controller activates the pneumatic actuator to offset electromechanical actuator loads to assist the manipulation of flight control surfaces. The assistance from the pneumatic load assist actuator enables the use of an electromechanical actuator that is smaller in size and mass, requires less power, needs less cooling processes, achieves high output forces and adapts to electrical current variations. The flight control actuation system is adapted for aircraft, spacecraft, missiles, and other flight vehicles, especially flight vehicles that are large in size and travel at high velocities.

  14. RF MEMS Based Reconfigurable Antennas

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.

    2004-01-01

    The presentation will first of all address the advantages of RF MEMS circuit in antenna applications and also the need for electronically reconfigurable antennas. Next, discuss some of the recent examples of RF MEMS based reconfigurable microstrip antennas. Finally, conclude the talk with a summary of MEMS antenna performance.

  15. Electrothermal MEMS fiber scanner for optical endomicroscopy.

    PubMed

    Seo, Yeong-Hyeon; Hwang, Kyungmin; Park, Hyeon-Cheol; Jeong, Ki-Hun

    2016-02-22

    We report a novel MEMS fiber scanner with an electrothermal silicon microactuator and a directly mounted optical fiber. The microactuator comprises double hot arm and cold arm structures with a linking bridge and an optical fiber is aligned along a silicon fiber groove. The unique feature induces separation of resonant scanning frequencies of a single optical fiber in lateral and vertical directions, which realizes Lissajous scanning during the resonant motion. The footprint dimension of microactuator is 1.28 x 7 x 0.44 mm3. The resonant scanning frequencies of a 20 mm long optical fiber are 239.4 Hz and 218.4 Hz in lateral and vertical directions, respectively. The full scanned area indicates 451 μm x 558 μm under a 16 Vpp pulse train. This novel laser scanner can provide many opportunities for laser scanning endomicroscopic applications.

  16. Physical and reliability issues in MEMS microrelays with gold contacts

    NASA Astrophysics Data System (ADS)

    Lafontan, Xavier; Pressecq, Francis; Perez, Guy; Dufaza, Christian; Karam, Jean Michel

    2001-10-01

    This paper presents the work we have done on micro-relays with gold micro-contacts in MUMPs. Firstly, the theoretical physical principles of MEMS micro-relay are described. This study is divided in two parts: the micro-contact and the micro-actuator. The micro-contact part deals with resistance of constriction, contact area, adhesion, arcing and wear. Whereas the micro-actuator part describes general principles, contact force, restoring force and actuator reliability. Then, in a second part, an innovative electrostatic relay design in MUMPs is presented. The concept, the implementation and the final realization are discussed. Then, in the third part, characterization results are reported. This part particularly focuses on the micro-contact study. Conduction mode, contact area, mechanical and thermal deformation, and adhesion energies are presented.

  17. Triz in Mems

    NASA Astrophysics Data System (ADS)

    Apte, Prakash R.

    1999-11-01

    TRIZ is a Russian abbreviation. Genrich Altshuller developed it fifty years ago in the former Soviet Union. He examined thousands of inventions made in different technological systems and formulated a 'Theory of Inventive problem solving' (TRIZ). Altshuller's research of over fifty years on Creativity and Inventive Problem Solving has led to many different classifications, methods and tools of invention. Some of these are, Contradictions table, Level of inventions, Patterns in evolution of technological systems, ARIZ-Algorithm for Inventive Problem Solving, Diagnostic problem solving and Anticipatory Failure Determination. MEMS research consists of conceptual design, process technology and including of various Mechanical, ELectrical, Thermal, Magnetic, Acoustic and other effects. MEMS system s are now rapidly growing in complexity. Each system will thus follow one or more 'patterns of evolution' as given by Altshuller. This paper attempts to indicate how various TRIZ tools can be used in MEMS research activities.

  18. Use of thermal cycling to reduce adhesion of OTS coated coated MEMS cantilevers

    NASA Astrophysics Data System (ADS)

    Ali, Shaikh M.; Phinney, Leslie M.

    2003-01-01

    °Microelectromechanical systems (MEMS) have enormous potential to contribute in diverse fields such as automotive, health care, aerospace, consumer products, and biotechnology, but successful commercial applications of MEMS are still small in number. Reliability of MEMS is a major impediment to the commercialization of laboratory prototypes. Due to the multitude of MEMS applications and the numerous processing and packaging steps, MEMS are exposed to a variety of environmental conditions, making the prediction of operational reliability difficult. In this paper, we investigate the effects of operating temperature on the in-use adhesive failure of electrostatically actuated MEMS microcantilevers coated with octadecyltrichlorosilane (OTS) films. The cantilevers are subjected to repeated temperature cycles and electrostatically actuated at temperatures between 25°C and 300°C in ambient air. The experimental results indicate that temperature cycling of the OTS coated cantilevers in air reduces the sticking probability of the microcantilevers. The sticking probability of OTS coated cantilevers was highest during heating, which decreased during cooling, and was lowest during reheating. Modifications to the OTS release method to increase its yield are also discussed.

  19. EDITORIAL: International MEMS Conference 2006

    NASA Astrophysics Data System (ADS)

    Tay, Francis E. H.; Jianmin, Miao; Iliescu, Ciprian

    2006-04-01

    The International MEMS conference (iMEMS2006) organized by the Institute of Bioengineering and Nanotechnology and Nanyang Technological University aims to provide a platform for academicians, professionals and industrialists in various related fields from all over the world to share and learn from each other. Of great interest is the incorporation of the theme of life sciences application using MEMS. It is the desire of this conference to initiate collaboration and form network of cooperation. This has continued to be the objective of iMEMS since its inception in 1997. The technological advance of MEMS over the past few decades has been truly exciting in terms of development and applications. In order to participate in this rapid development, a conference involving delegates from within the MEMS community and outside the community is very meaningful and timely. With the receipt of over 200 articles, delegates related to MEMS field from all over the world will share their perspectives on topics such as MEMS/MST Design, MEMS Teaching and Education, MEMS/MST Packaging, MEMS/MST Fabrication, Microsystems Applications, System Integration, Wearable Devices, MEMSWear and BioMEMS. Invited speakers and delegates from outside the field have also been involved to provide challenges, especially in the life sciences field, for the MEMS community to potentially address. The proceedings of the conference will be published as an issue in the online Journal of Physics: Conference Series and this can reach a wider audience and will facilitate the reference and citation of the work presented in the conference. We wish to express our deep gratitude to the International Scientific Committee members and the organizing committee members for contributing to the success of this conference. We would like to thank all the delegates, speakers and sponsors from all over the world for presenting and sharing their perspectives on topics related to MEMS and the challenges that MEMS can

  20. MEMS Using SOI Substrate

    NASA Technical Reports Server (NTRS)

    Tang, Tony K.

    1999-01-01

    At NASA, the focus for smaller, less costly missions has given impetus for the development of microspacecraft. MicroElectroMechanical System (MEMS) technology advances in the area of sensor, propulsion systems, and instruments, make the notion of a specialized microspacecraft feasible in the immediate future. Similar to the micro-electronics revolution,the emerging MEMS technology offers the integration of recent advances in micromachining and nanofabrication techniques with microelectronics in a mass-producible format,is viewed as the next step in device and instrument miniaturization. MEMS technology offers the potential of enabling or enhancing NASA missions in a variety of ways. This new technology allows the miniaturization of components and systems, where the primary benefit is a reduction in size, mass and power. MEMS technology also provides new capabilities and enhanced performance, where the most significant impact is in performance, regardless of system size. Finally,with the availability of mass-produced, miniature MEMS instrumentation comes the opportunity to rethink our fundamental measurement paradigms. It is now possible to expand our horizons from a single instrument perspective to one involving multi-node distributed systems. In the distributed systems and missions, a new system in which the functionality is enabled through a multiplicity of elements. Further in the future, the integration of electronics, photonics, and micromechanical functionalities into "instruments-on-a-chip" will provide the ultimate size, cost, function, and performance advantage. In this presentation, I will discuss recent development, requirement, and applications of various MEMS technologies and devices for space applications.

  1. Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation

    DOEpatents

    Allen, James J.; Sinclair, Michael B.; Dohner, Jeffrey L.

    2005-11-22

    A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of the incident light which can be shifted in phase or propagation angle. The MEM device, which utilizes leveraged bending to provide a relatively-large vertical displacement up to several microns for the light-reflective plate, has applications for forming an electrically-programmable diffraction grating (i.e. a polychromator) or a micromirror array.

  2. Electrostatic actuated strain engineering in monolithically integrated VLS grown silicon nanowires

    NASA Astrophysics Data System (ADS)

    Wagesreither, Stefan; Bertagnolli, Emmerich; Kawase, Shinya; Isono, Yoshitada; Lugstein, Alois

    2014-11-01

    In this paper we demonstrate the fabrication and application of an electrostatic actuated tensile straining test (EATEST) device enabling strain engineering in individual suspended nanowires (NWs). Contrary to previously reported approaches, this special setup guarantees the application of pure uniaxial tensile strain with no shear component of the stress while e.g. simultaneously measuring the resistance change of the NW. To demonstrate the potential of this approach we investigated the piezoresistivity of about 3 μm long and 100 nm thick SiNWs but in the same way one can think about the application of such a device on other geometries, other materials beyond Si as well as the use of other characterization techniques beyond electrical measurements. Therefore single-crystal SiNWs were monolithically integrated in a comb drive actuated MEMS device based on a silicon-on-insulator (SOI) wafer using the vapor-liquid-solid (VLS) growth technique. Strain values were verified by a precise measurement of the NW elongation with scanning electron microscopy (SEM). Further we employed confocal μ-Raman microscopy for in situ, high spatial resolution measurements of the strain in individual SiNWs during electrical characterization. A giant piezoresistive effect was observed, resulting in a fivefold increase in conductivity for 3% uniaxially strained SiNWs. As the EATEST approach can be easily integrated into an existing Si technology platform this architecture may pave the way toward a new generation of nonconventional devices by leveraging the strain degree of freedom.

  3. Micro-Ball-Lens Optical Switch Driven by SMA Actuator

    NASA Technical Reports Server (NTRS)

    Yang, Eui-Hyeok

    2003-01-01

    The figure is a simplified cross section of a microscopic optical switch that was partially developed at the time of reporting the information for this article. In a fully developed version, light would be coupled from an input optical fiber to one of two side-by-side output optical fibers. The optical connection between the input and the selected output fiber would be made via a microscopic ball lens. Switching of the optical connection from one output fiber to another would be effected by using a pair of thin-film shape-memory-alloy (SMA) actuators to toggle the lens between two resting switch positions. There are many optical switches some made of macroscopic parts by conventional fabrication techniques and some that are microfabricated and, hence, belong to the class of microelectromechanical systems (MEMS). Conventionally fabricated optical switches tend to be expensive. MEMS switches can be mass-produced at relatively low cost, but their attractiveness has been diminished by the fact that, heretofore, MEMS switches have usually been found to exhibit high insertion losses. The present switch is intended to serve as a prototype of low-loss MEMS switches. In addition, this is the first reported SMA-based optical switch. The optical fibers would be held in V grooves in a silicon frame. The lens would have a diameter of 1 m; it would be held by, and positioned between, the SMA actuators, which would be made of thin films of TiNi alloy. Although the SMA actuators are depicted here as having simple shapes for the sake of clarity of illustration, the real actuators would have complex, partly net-like shapes. With the exception of the lens and the optical fibers, the SMA actuators and other components of the switch would be made by microfabrication techniques. The components would be assembled into a sandwich structure to complete the fabrication of the switch. To effect switching, an electric current would be passed through one of the SMA actuators to heat it above

  4. Nanotechnology: MEMS and NEMS and their applications to smart systems and devices

    NASA Astrophysics Data System (ADS)

    Varadan, Vijay K.

    2003-10-01

    The microelectronics industry has seen explosive growth during the last thirty years. Extremely large markets for logic and memory devices have driven the development of new materials, and technologies for the fabrication of even more complex devices with features sizes now down at the sub micron and nanometer level. Recent interest has arisen in employing these materials, tools and technologies for the fabrication of miniature sensors and actuators and their integration with electronic circuits to produce smart devices and systems. This effort offers the promise of: (1) increasing the performance and manufacturability of both sensors and actuators by exploiting new batch fabrication processes developed including micro stereo lithographic and micro molding techniques; (2) developing novel classes of materials and mechanical structures not possible previously, such as diamond like carbon, silicon carbide and carbon nanotubes, micro-turbines and micro-engines; (3) development of technologies for the system level and wafer level integration of micro components at the nanometer precision, such as self-assembly techniques and robotic manipulation; (4) development of control and communication systems for MEMS devices, such as optical and RF wireless, and power delivery systems, etc. A novel composite structure can be tailored by functionalizing carbon nano tubes and chemically bonding them with the polymer matrix e.g. block or graft copolymer, or even cross-linked copolymer, to impart exceptional structural, electronic and surface properties. Bio- and Mechanical-MEMS devices derived from this hybrid composite provide a new avenue for future smart systems. The integration of NEMS (NanoElectroMechanical Systems), MEMS, IDTs (Interdigital Transducers) and required microelectronics and conformal antenna in the multifunctional smart materials and composites results in a smart system suitable for sending and control of a variety functions in automobile, aerospace, marine and

  5. Superconducting linear actuator

    NASA Technical Reports Server (NTRS)

    Johnson, Bruce; Hockney, Richard

    1993-01-01

    Special actuators are needed to control the orientation of large structures in space-based precision pointing systems. Electromagnetic actuators that presently exist are too large in size and their bandwidth is too low. Hydraulic fluid actuation also presents problems for many space-based applications. Hydraulic oil can escape in space and contaminate the environment around the spacecraft. A research study was performed that selected an electrically-powered linear actuator that can be used to control the orientation of a large pointed structure. This research surveyed available products, analyzed the capabilities of conventional linear actuators, and designed a first-cut candidate superconducting linear actuator. The study first examined theoretical capabilities of electrical actuators and determined their problems with respect to the application and then determined if any presently available actuators or any modifications to available actuator designs would meet the required performance. The best actuator was then selected based on available design, modified design, or new design for this application. The last task was to proceed with a conceptual design. No commercially-available linear actuator or modification capable of meeting the specifications was found. A conventional moving-coil dc linear actuator would meet the specification, but the back-iron for this actuator would weigh approximately 12,000 lbs. A superconducting field coil, however, eliminates the need for back iron, resulting in an actuator weight of approximately 1000 lbs.

  6. In-plane deeply-etched optical MEMS notch filter with high-speed tunability

    NASA Astrophysics Data System (ADS)

    Sabry, Yasser M.; Eltagoury, Yomna M.; Shebl, Ahmed; Soliman, Mostafa; Sadek, Mohamed; Khalil, Diaa

    2015-12-01

    Notch filters are used in spectroscopy, multi-photon microscopy, fluorescence instrumentation, optical sensors and other life science applications. One type of notch filter is based on a fiber-coupled Fabry-Pérot cavity, which is formed by a reflector (external mirror) facing a dielectric-coated end of an optical fiber. Tailoring this kind of optical filter for different applications is possible because the external mirror has fewer mechanical and optical constraints. In this paper we present optical modeling and implementation of a fiber-coupled Fabry-Pérot filter based on dielectric-coated optical fiber inserted into a micromachined fiber groove facing a metallized micromirror, which is driven by a high-speed MEMS actuator. The optical MEMS chip is fabricated using deep reactive ion etching (DRIE) technology on a silicon on insulator wafer, where the optical axis is parallel to the substrate (in-plane) and the optical/mechanical components are self-aligned by the photolithographic process. The DRIE etching depth is 150 μm, chosen to increase the micromirror optical throughput and improving the out-of-plane stiffness of the MEMS actuator. The MEMS actuator type is closing-gap, while its quality factor is almost doubled by slotting the fixed plate. A low-finesse Fabry-Pérot interferometer is formed by the metallized surface of the micromirror and a cleaved end of a standard single-mode fiber, for characterization of the MEMS actuator stroke and resonance frequency. The actuator achieves a travel distance of 800 nm at a resonance frequency of 89.9 kHz. The notch filter characteristics were measured using an optical spectrum analyzer, and the filter exhibits a free spectral range up to 100 nm and a notch rejection ratio up to 20 dB around a wavelength of 1300 nm. The presented device provides batch processing and low-cost production of the filter.

  7. Photonic MEMS switch applications

    NASA Astrophysics Data System (ADS)

    Husain, Anis

    2001-07-01

    As carriers and service providers continue their quest for profitable network solutions, they have shifted their focus from raw bandwidth to rapid provisioning, delivery and management of revenue generating services. Inherently transparent to data rate the transmission wavelength and data format, MEMS add scalability, reliability, low power and compact size providing flexible solutions to the management and/or fiber channels in long haul, metro, and access networks. MEMS based photonic switches have gone from the lab to commercial availability and are now currently in carrier trials and volume production. 2D MEMS switches offer low up-front deployment costs while remaining scalable to large arrays. They allow for transparent, native protocol transmission. 2D switches enable rapid service turn-up and management for many existing and emerging revenue rich services such as storage connectivity, optical Ethernet, wavelength leasing and optical VPN. As the network services evolve, the larger 3D MEMS switches, which provide greater scalability and flexibility, will become economically viable to serve the ever-increasing needs.

  8. Power MEMS Development

    DTIC Science & Technology

    2009-08-01

    and 10 µA load current. DIAMOND HEAT SPREADER OR HEAT SINK FOR HIGH POWER MEMS SWITCHES APPLICATIONS (TASK 1.3) Contributors: Priscila Spagnol...m of thermal SiO2. The wafers were than ultrasonicated in a nanodiamond water suspension for 20 min and cleaned in methanol for more than 10 min. The

  9. A MEMS turbine prototype for respiration harvesting

    NASA Astrophysics Data System (ADS)

    Goreke, U.; Habibiabad, S.; Azgin, K.; Beyaz, M. I.

    2015-12-01

    The design, manufacturing, and performance characterization of a MEMS-scale turbine prototype is reported. The turbine is designed for integration into a respiration harvester that can convert normal human breathing into electrical power through electromagnetic induction. The device measures 10 mm in radius, and employs 12 blades located around the turbine periphery along with ball bearings around the center. Finite element simulations showed that an average torque of 3.07 μNm is induced at 12 lpm airflow rate, which lies in normal breathing levels. The turbine and a test package were manufactured using CNC milling on PMMA. Tests were performed at respiration flow rates between 5-25 lpm. The highest rotational speed was measured to be 9.84 krpm at 25 lpm, resulting in 8.96 mbar pressure drop across the device and 370 mW actuation power.

  10. Lifetime characteristics of ohmic MEMS switches

    NASA Astrophysics Data System (ADS)

    Maciel, John; Majumder, Sumit; Morrison, Richard; Lampen, James

    2003-12-01

    In the future, MEMS switches will be important building blocks for designing phase shifters, smart antennas, cell phones and switched filters for military and commercial markets, to name a few. Low power consumption, large ratio of off-impedance to on-impedance and the ability to be integrated with other electronics makes MEMS switches an attractive alternative to other mechanical and solid-state switches. Radant MEMS has developed an electrostatically actuated broadband ohmic microswitch that has applications from DC through the microwave region. The microswitch is a 3-terminal device based on a cantilever beam and is fabricated using an all-metal, surface micromachining process. It operates in a hermetic environment obtained through a wafer-bonding process. We have developed PC-based test stations to cycle switches and measure lifetime under DC and RF loads. Best-case lifetimes of 1011 cycles have been achieved in T0-8 cans (a precursor to our wafer level cap) while greater than 1010 cycles have been achieved in the wafer level package. Several switches from different lots have been operated to 1010 cycles. Current typical lifetime exceeds 2 billion cycles and is limited by contact stiction resulting in stuck-closed failures. Stuck-closed failures can be intermittent with a large number of switches continuing to operate with occasional sticks beyond several billion cycles. To eliminate contact stiction, we need to better control the ambient gas composition in the die cavity. We expect lifetime to improve as we continue to develop and optimize the wafer capping process. We present DC and RF lifetime data under varying conditions.

  11. Electrothermal actuators fabricated in four-level planarized surface-miromachined polycrystalline silicon

    SciTech Connect

    Comtois, J.H.; Michalicek, A.; Barron, C.C.

    1997-11-01

    This paper presents the results of tests performed on a variety of electrochemical microactuators and arrays of these actuators fabricated in the SUMMiT process at the U.S. Department of Energy`s Sandia National Laboratories. These results are intended to aid designers of thermally actuated mechanisms, and they apply to similar actuators made in other polysilicon MEMS processes such as the MUMPS process. Measurements include force and deflection versus input power, maximum operating frequency, effects of long term operation, and ideal actuator and array geometries for different applications` force requirements. Also, different methods of arraying these actuators together are compared. It is found that a method using rotary joints, enabled by the advanced features of the SUMMiT fabrication process, is the most efficient array design. The design and operation of a thermally actuated stepper motor is explained to illustrate a useful application of these arrays.

  12. Numerical and experimental study of actuator performance on piezoelectric microelectromechanical inkjet print head.

    PubMed

    Van So, Pham; Jun, Hyun Woo; Lee, Jaichan

    2013-12-01

    We have investigated the actuator performance of a piezoelectrically actuated inkjet print head via the numerical and experimental analysis. The actuator consisting of multi-layer membranes, such as piezoelectric, elastic and other buffer layers, and ink chamber was fabricated by MEMS processing. The maximum displacement of the actuator membrane obtained in the experiment is explained by numerical analysis. A simulation of the actuator performance with fluidic damping shows that the resonant frequency of the membrane in liquid is reduced from its resonant frequency in air by a factor of three, which was also verified in the experiment. These simulation and experimental studies demonstrate how much "dynamic force," in terms of a membrane's maximum displacement, maximum force and driving frequency, can be produced by an actuator membrane interacting with fluid.

  13. Demonstrating Optothermal Actuators for an Autonomous Mems Microrobot

    DTIC Science & Technology

    2004-03-01

    of microrobots to deliver a small explosive charge into a small area (such as a cable trough or cave), where it can then be detonated to sever... xdT A dx xdT Aqq == −=−== κκ (5.24) which gives, 12 2 12 2 11 1 11 1 24231211 L CS L CS L CS L CS eACeACeACeAC γγγγ γγγγ −− −=− (5.25) Similarly

  14. High Actuator Count MEMS Deformable Mirrors for Space Telescopes

    DTIC Science & Technology

    2010-06-07

    Astronomy – Direct Planet Detection • High Contrast Imaging – Astronomy/Reconnaissance • Correction of surface figure errors in Light weight primary mirrors...NASA’s TPF Coronagraphic Imaging Observatory EPIC PECO Extrasolar Planetary Imaging Coronagraph Pupil-mapping Exoplanet Coronagraphic Observer Why

  15. Design and Simulation of an Electrothermal Actuator Based Rotational Drive

    NASA Astrophysics Data System (ADS)

    Beeson, Sterling; Dallas, Tim

    2008-10-01

    As a participant in the Micro and Nano Device Engineering (MANDE) Research Experience for Undergraduates program at Texas Tech University, I learned how MEMS devices operate and the limits of their operation. Using specialized AutoCAD-based design software and the ANSYS simulation program, I learned the MEMS fabrication process used at Sandia National Labs, the design limitations of this process, the abilities and drawbacks of micro devices, and finally, I redesigned a MEMS device called the Chevron Torsional Ratcheting Actuator (CTRA). Motion is achieved through electrothermal actuation. The chevron (bent-beam) actuators cause a ratcheting motion on top of a hub-less gear so that as voltage is applied the CTRA spins. The voltage applied needs to be pulsed and the frequency of the pulses determine the angular frequency of the device. The main objective was to design electromechanical structures capable of transforming the electrical signals into mechanical motion without overheating. The design was optimized using finite element analysis in ANSYS allowing multi-physics simulations of our model system.

  16. MEMS for medical technology applications

    NASA Astrophysics Data System (ADS)

    Frisk, Thomas; Roxhed, Niclas; Stemme, Göran

    2007-01-01

    This paper gives an in-depth description of two recent projects at the Royal Institute of Technology (KTH) which utilize MEMS and microsystem technology for realization of components intended for specific applications in medical technology and diagnostic instrumentation. By novel use of the DRIE fabrication technology we have developed side-opened out-of-plane silicon microneedles intended for use in transdermal drug delivery applications. The side opening reduces clogging probability during penetration into the skin and increases the up-take area of the liquid in the tissue. These microneedles offer about 200µm deep and pain-free skin penetration. We have been able to combine the microneedle chip with an electrically and heat controlled liquid actuator device where expandable microspheres are used to push doses of drug liquids into the skin. The entire unit is made of low cost materials in the form of a square one cm-sized patch. Finally, the design, fabrication and evaluation of an integrated miniaturized Quartz Crystal Microbalance (QCM) based "electronic nose" microsystem for detection of narcotics is described. The work integrates a novel environment-to-chip sample interface with the sensor element. The choice of multifunctional materials and the geometric features of a four-component microsystem allow a functional integration of a QCM crystal, electrical contacts, fluidic contacts and a sample interface in a single system with minimal assembly effort, a potential for low-cost manufacturing, and a few orders of magnitude reduced in system size (12*12*4 mm 3) and weight compared to commercially available instruments. The sensor chip was successfully used it for the detection of 200 ng of narcotics sample.

  17. Micromachined electrostatic vertical actuator

    DOEpatents

    Lee, Abraham P.; Sommargren, Gary E.; McConaghy, Charles F.; Krulevitch, Peter A.

    1999-10-19

    A micromachined vertical actuator utilizing a levitational force, such as in electrostatic comb drives, provides vertical actuation that is relatively linear in actuation for control, and can be readily combined with parallel plate capacitive position sensing for position control. The micromachined electrostatic vertical actuator provides accurate movement in the sub-micron to micron ranges which is desirable in the phase modulation instrument, such as optical phase shifting. For example, compact, inexpensive, and position controllable micromirrors utilizing an electrostatic vertical actuator can replace the large, expensive, and difficult-to-maintain piezoelectric actuators. A thirty pound piezoelectric actuator with corner cube reflectors, as utilized in a phase shifting diffraction interferometer can be replaced with a micromirror and a lens. For any very precise and small amplitudes of motion` micromachined electrostatic actuation may be used because it is the most compact in size, with low power consumption and has more straightforward sensing and control options.

  18. Electromagnetic rotational actuation.

    SciTech Connect

    Hogan, Alexander Lee

    2010-08-01

    There are many applications that need a meso-scale rotational actuator. These applications have been left by the wayside because of the lack of actuation at this scale. Sandia National Laboratories has many unique fabrication technologies that could be used to create an electromagnetic actuator at this scale. There are also many designs to be explored. In this internship exploration of the designs and fabrications technologies to find an inexpensive design that can be used for prototyping the electromagnetic rotational actuator.

  19. AirJet paper mover: an example of mesoscale MEMS

    NASA Astrophysics Data System (ADS)

    Biegelsen, David K.; Berlin, Andrew A.; Cheung, Patrick; Fromherz, Markus P.; Goldberg, David; Jackson, Warren B.; Preas, Bryan; Reich, James; Swartz, Lars E.

    2000-08-01

    The motion of human scale objects requires MEMS-like device arrays capable of providing reasonable forces ($GTR mN) over human scale distances (10-100 cm). In principle batch fabricated values controlling air jets can satisfy these actuation requirements. By extending printed circuit board technology to include electromechanical actuation, analogous to the extension of VLSI to MEMS, the requirement of low system cost can be achieved through batch fabrication and integration of the transduction elements with computational and communication elements. In this paper we show that modulated air jets arrayed with position sensors can support and accelerate flexible media without physical contact. Precise motion control with three degrees of freedom parallel to the array, using high flow, low pressure air jet arrays is enabled using electrostatic valves having opening and closing times of approximately equals 1 ms. We present results of an exemplary platform based on printed circuit board technologies, having an array of 576 electrostatic flap valvves (1152 for double-sided actuation) and associated oriented jets, and an integrated array of 32,000 optical sensors for high resolution detection of paper edge positions. Under closed loop control edge positioning has a standard deviation of approximately equals 25 microns. Fabrication and control of the system is described.

  20. Multi-output Q-switched solid-state laser using an intra-cavity MEMS micromirror array

    NASA Astrophysics Data System (ADS)

    Bauer, Ralf; Lubeigt, Walter; Clark, Caspar; McBrearty, Euan; Uttamchandani, Deepak

    2013-03-01

    Multiple individually-controllable Q-switched laser outputs from a single diode-pumped Nd:YAG module are presented by using an electrostatic MEMS scanning micromirror array as cavity end-mirror. The gold coated, 700 μm diameter and 25 μm thick, single-crystal silicon micromirrors possess resonant tilt frequencies of ~8 kHz with optical scan angles of up to 78°. Dual laser output resulting from the actuation of two neighboring mirrors was observed resulting in a combined average output power of 125 mW and pulse durations of 30 ns with resulting pulse energies of 7.9 μJ and 7.1 μJ. The output power was limited by thermal effects on the gold-coated mirror surface. Dielectric coatings with increased reflectivity and therefore lower thermal stresses are required to power-scale this technique. An initial SiO2/Nb2O5 test coating was applied to a multi-mirror array with individual optical scan angles of 14° at a resonant tilt frequency of 10.4 kHz. The use of this dielectric coated array inside a 3-mirror Nd:YAG laser cavity led to a single mirror output with average Q-switched output power of 750 mW and pulse durations of 295 ns resulting in pulse energies of 36 μJ.

  1. Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions

    DOEpatents

    Lopez, Daniel; Wiederrecht, Gary; Gosztola, David J.; Mancini, Derrick C.

    2017-01-17

    A nanopositioning system for producing a coupling interaction between a first nanoparticle and a second nanoparticle. A first MEMS positioning assembly includes an electrostatic comb drive actuator configured to selectively displace a first nanoparticle in a first dimension and an electrode configured to selectively displace the first nanoparticle in a second dimensions. Accordingly, the first nanoparticle may be selectively positioned in two dimensions to modulate the distance between the first nanoparticle and a second nanoparticle that may be coupled to a second MEMS positioning assembly. Modulating the distance between the first and second nanoparticles obtains a coupling interaction between the nanoparticles that alters at least one material property of the nanoparticles applicable to a variety of sensing and control applications.

  2. MEMS Microshutter Arrays for James Webb Space Telescope

    NASA Technical Reports Server (NTRS)

    Li, Mary J.; Beamesderfer, Michael; Babu, Sachi; Bajikar, Sateesh; Ewin, Audrey; Franz, Dave; Hess, Larry; Hu, Ron; Jhabvala, Murzy; Kelly, Dan; King, Todd; Kletetschkar, Gunther; Kutyrev, Alexander; Lynch, Barney; Moseley, Harvey; Mott, Brent; Oh, Lance; Rapchum, Dave; Ray, Chris; Sappington, Carol; Silverberg, Robert; Smith, Wayne; Snodgrass, Steve; Steptoe-Jackson, Rosalind; Valeriano

    2006-01-01

    MEMS microshutter arrays are being developed at NASA Goddard Space Flight Center for use as an aperture array for a Near-Infrared Spectrometer (NirSpec). The instruments will be carried on the James Webb Space Telescope (JWST), the next generation of space telescope after Hubble Space Telescope retires. The microshutter arrays are designed for the selective transmission of light with high efficiency and high contrast, Arrays are close-packed silicon nitride membranes with a pixel size of 100x200 microns. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. Light shields are made on to each shutter for light leak prevention so to enhance optical contrast, Shutters are actuated magnetically, latched and addressed electrostatically. The shutter arrays are fabricated using MEMS technologies.

  3. MEMS Incandescent Light Source

    NASA Technical Reports Server (NTRS)

    Tuma, Margaret; King, Kevin; Kim, Lynn; Hansler, Richard; Jones, Eric; George, Thomas

    2001-01-01

    A MEMS-based, low-power, incandescent light source is being developed. This light source is fabricated using three bonded chips. The bottom chip consists of a reflector on Silicon, the middle chip contains a Tungsten filament bonded to silicon and the top layer is a transparent window. A 25-micrometer-thick spiral filament is fabricated in Tungsten using lithography and wet-etching. A proof-of-concept device has been fabricated and tested in a vacuum chamber. Results indicate that the filament is electrically heated to approximately 2650 K. The power required to drive the proof-of-concept spiral filament to incandescence is 1.25 W. The emitted optical power is expected to be approximately 1.0 W with the spectral peak at 1.1 microns. The micromachining techniques used to fabricate this light source can be applied to other MEMS devices.

  4. MEMS technologies for rf communications

    NASA Astrophysics Data System (ADS)

    Wu, Qun; Kim, B. K.

    2001-04-01

    Microelectromechanical system (MEMS) represents an exciting new technology derived from the same fabricating processes used to make integrated circuits. The trends of growing importance of the wireless communications market is toward the system with minimal size, cost and power consumption. For the purpose of MEMS R&D used for wireless communications, a history and present situation of MEMS device development are reviewed in this paper, and an overview of MEMS research topics on RF communication applications and the state of the art technologies are also presented here.

  5. Bimorphic polymeric photomechanical actuator

    NASA Technical Reports Server (NTRS)

    Sarkisov, Sergey S. (Inventor); Curley, Michael J. (Inventor); Adamovsky, Grigory (Inventor); Sarkisov, Jr., Sergey S. (Inventor); Fields, Aisha B. (Inventor)

    2006-01-01

    A bimorphic polymeric photomechanical actuator, in one embodiment using polyvinylidene fluoride (PVDF) as a photosensitive body, transmitting light over fiber optic cables, and controlling the shape and pulse duration of the light pulse to control movement of the actuator. Multiple light beams are utilized to generate different ranges of motion for the actuator from a single photomechanical body and alternative designs use multiple light beams and multiple photomechanical bodies to provide controlled movement. Actuator movement using one or more ranges of motion is utilized to control motion to position an actuating element in three dimensional space.

  6. A MEMS-based tunable coplanar patch antenna fabricated using PCB processing techniques

    NASA Astrophysics Data System (ADS)

    Maddela, M.; Ramadoss, R.; Lempkowski, R.

    2007-04-01

    In this paper, a tunable coplanar rectangular patch antenna (CPA) designed using a MEMS varactor is reported. The MEMS varactor is monolithically integrated with the antenna on Duroid substrate using printed circuit processing techniques. Specifically, the MEMS varactor located at one of the radiating edges capacitively loads the CPA. The resonant frequency of the antenna is tuned electrostatically by applying a DC bias voltage between the MEMS varactor and the actuation pad on the antenna. The movable MEMS varactor membrane deflects downward toward the actuation pad due to an electrostatic force of attraction caused by the applied DC bias voltage. The deflection of the varactor membrane decreases the air gap, thereby increasing the loading capacitance. The increase in the loading capacitance results in a downward shift in the resonant frequency of the CPA. The CPA is center fed at the second radiating edge using a 50 Ω CPW feed line. The CPA operates in the frequency range from 5.185 to 5.545 GHz corresponding to the down and up states of the varactor. The tunable frequency range is about 360 MHz and the return loss is better than 40 dB in the entire tuning range. In this tuning range, the required DC voltage is in the range of 0-116 V.

  7. Electrowetting-on-dielectric actuation of a vertical translation and angular manipulation stage

    NASA Astrophysics Data System (ADS)

    Preston, Daniel J.; Anders, Ariel; Barabadi, Banafsheh; Tio, Evelyn; Zhu, Yangying; Dai, DingRan Annie; Wang, Evelyn N.

    2016-12-01

    Adhesion and friction during physical contact of solid components in microelectromechanical systems (MEMS) often lead to device failure. Translational stages that are fabricated with traditional silicon MEMS typically face these tribological concerns. This work addresses these concerns by developing a MEMS vertical translation, or focusing, stage that uses electrowetting-on-dielectric (EWOD) as the actuating mechanism. EWOD has the potential to eliminate solid-solid contact by actuating through deformation of liquid droplets placed between the stage and base to achieve stage displacement. Our EWOD stage is capable of linear spatial manipulation with resolution of 10 μm over a maximum range of 130 μm and angular deflection of approximately ±1°, comparable to piezoelectric actuators. We also developed a model that suggests a higher intrinsic contact angle on the EWOD surface can further improve the translational range, which was validated experimentally by comparing different surface coatings. The capability to operate the stage without solid-solid contact offers potential improvements for applications in micro-optics, actuators, and other MEMS devices.

  8. MEMS Aluminum Nitride Technology for Inertial Sensors

    NASA Astrophysics Data System (ADS)

    Vigevani, Gabriele

    2011-12-01

    The design and fabrication of MEMS Inertial Sensors (both accelerometers and gyroscopes) made of Aluminum Nitride (AlN) is described in this dissertation. The goal of this work is to design and fabricate inertial sensors based on c-axis oriented AlN polycrystalline thin films. AlN is a post-CMOS compatible piezoelectric material widely used for acoustic resonators, such Bulk Acoustic Wave (BAW) and Lamb Wave Resonators (LWR). In this work we develop the design techniques necessary to obtain inertial sensors with AlN thin film technology. Being able to use AlN as structural material for both acoustic wave resonator and sensing elements is key to achieve the three level integration of RF-MEMS components, sensing elements and CMOS in the same chip. Using AlN as integration platform is particularly suitable for large consumer emerging markets where production costs are the major factor that determine a product success. In order to achieve a platform integration, the first part of this work focuses on the fabrication process: starting from the fabrication technology used for LWR devices, this work shows that by slightly modifying some of the fabrication steps it is possible to obtain MEMS accelerometers and gyroscopes with the same structural layers used for LWR. In the second part of this work, an extensive analysis, performed with analytical and Finite Element Models (FEM), is developed for beam and ring based structures. These models are of great importance as they provide tools to understand the physics of lateral piezoelectric beam actuation and the major limitations of this technology. Based on the models developed for beam based resonators, we propose two designs for Double Ended Tuning Fork (DETF) based accelerometers. In the last part of the dissertation, we show the experimental results and the measurements performed on actual devices. As this work shows analytically and experimentally, there are some fundamental constraints that limit the ultimate sensitivity

  9. High fidelity frictional models for MEMS.

    SciTech Connect

    Carpick, Robert W.; Reedy, Earl David, Jr.; Bitsie, Fernando; de Boer, Maarten Pieter; Corwin, Alex David; Ashurst, William Robert; Jones, Reese E.; Subhash, Ghatu S.; Street, Mark D.; Sumali, Anton Hartono; Antoun, Bonnie R.; Starr, Michael James; Redmond, James Michael; Flater, Erin E.

    2004-10-01

    The primary goals of the present study are to: (1) determine how and why MEMS-scale friction differs from friction on the macro-scale, and (2) to begin to develop a capability to perform finite element simulations of MEMS materials and components that accurately predicts response in the presence of adhesion and friction. Regarding the first goal, a newly developed nanotractor actuator was used to measure friction between molecular monolayer-coated, polysilicon surfaces. Amontons law does indeed apply over a wide range of forces. However, at low loads, which are of relevance to MEMS, there is an important adhesive contribution to the normal load that cannot be neglected. More importantly, we found that at short sliding distances, the concept of a coefficient of friction is not relevant; rather, one must invoke the notion of 'pre-sliding tangential deflections' (PSTD). Results of a simple 2-D model suggests that PSTD is a cascade of small-scale slips with a roughly constant number of contacts equilibrating the applied normal load. Regarding the second goal, an Adhesion Model and a Junction Model have been implemented in PRESTO, Sandia's transient dynamics, finite element code to enable asperity-level simulations. The Junction Model includes a tangential shear traction that opposes the relative tangential motion of contacting surfaces. An atomic force microscope (AFM)-based method was used to measure nano-scale, single asperity friction forces as a function of normal force. This data is used to determine Junction Model parameters. An illustrative simulation demonstrates the use of the Junction Model in conjunction with a mesh generated directly from an atomic force microscope (AFM) image to directly predict frictional response of a sliding asperity. Also with regards to the second goal, grid-level, homogenized models were studied. One would like to perform a finite element analysis of a MEMS component assuming nominally flat surfaces and to include the effect of

  10. Dynamic measurements of actuators driven by AlN layers

    NASA Astrophysics Data System (ADS)

    Kacperski, Jacek; Kujawinska, Malgorzata; Leon, Sergio Camacho; Nieradko, Lukasz; Jozwik, Michal; Gorecki, Christophe

    2005-09-01

    Micro-Electro-Mechanical Systems are nowadays frequently used in many fields of industry. The number of their applications increase and their functions became more complex and demanding. Therefore precise knowledge about their static (shape, deformations, stresses) and dynamic (resonance frequencies, amplitude and phase of vibration) properties is necessary. Two beam laser interferometry is one of the most popular testing methods of micromechanical elements as a non-contact, high-accurate method allowing full-field measurement. First part of the paper present microbeam actuators designed for MEMS/MOEMS applications. The proposed structures are the straight silicon microbeams formed by KOH etching of Si wafer. Aluminium nitride (AlN) thin films are promising materials for many acoustic and optic applications in MEMS field. In the proposed architecture the actuation layer is sandwiched between two metal electrodes on the top of beam. In the second part we describe the methodology of the actuator characterization. These methods applied are: stroboscopic interferometry and active interferometry (LCOS SLM is used as a reference surface in Twyman-Green interferometer). Moreover some results of FEM analysis of the sample are shown and compared with experimental results. Dynamic measurements validate the design and simulations, and provide information for optimization of the actuator manufacturing process.

  11. Adaptive optics control system for segmented MEMS deformable mirrors

    NASA Astrophysics Data System (ADS)

    Kempf, Carl J.; Helmbrecht, Michael A.; Besse, Marc

    2010-02-01

    Iris AO has developed a full closed-loop control system for control of segmented MEMS deformable mirrors. It is based on a combination of matched wavefront sensing, modal wavefront estimation, and well-calibrated open-loop characteristics. This assures closed-loop operation free of problems related to co-phasing segments or undetectable waffle patterns. This controller strategy results in relatively simple on-line computations which are suitable for implementation on low cost digital signal processors. It has been successfully implemented on Iris AO's 111 actuator (37 segment) deformable mirrors used in test-beds and research systems.

  12. Charging characteritiscs of ultrananocrystalline diamond in RF MEMS capacitive switches.

    SciTech Connect

    Sumant, A. V.; Goldsmith, C.; Auciello, O.; Carlisle, J.; Zheng, H.; Hwang, J. C. M.; Palego, C.; Wang, W.; Carpick, R.; Adiga, V.; Datta, A.; Gudeman, C.; O'Brien, S.; Sampath, S.

    2010-05-01

    Modifications to a standard capacitive MEMS switch process have been made to allow the incorporation of ultra-nano-crystalline diamond as the switch dielectric. The impact on electromechanical performance is minimal. However, these devices exhibit uniquely different charging characteristics, with charging and discharging time constants 5-6 orders of magnitude quicker than conventional materials. This operation opens the possibility of devices which have no adverse effects of dielectric charging and can be operated near-continuously in the actuated state without significant degradation in reliability.

  13. Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators

    PubMed Central

    Ducrot, Pierre-Henri; Dufour, Isabelle; Ayela, Cédric

    2016-01-01

    This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via the evaluation of the actuation performance of MEMS resonators. Conditions such as annealing duration, poling field and poling duration have been optimized and repeatability of the process has been demonstrated. PMID:26792224

  14. Application of acousto-optic actuator applied in holographic system

    NASA Astrophysics Data System (ADS)

    Ling, FuRi; Wang, Biao

    2002-09-01

    In this paper, we discuss acousto-optical scanning and deflection, and design an acousto-optical actuator for steering the laser beam in the direction of vertical and horizon. In this system a laser whose wavelength is 532 nm is used and is expanded by a cylindrical lens. This horizontal actuator produces the horizontal deflection and the spherical lens following the horizontal actuator rotates the beam to match the aperture of the vertical actuator. The cylindrical lens restores the beam to its original circular cross-section, after which the microscope optics brings it to a focus in the lithium niobate crystal in which we store information.

  15. EDITORIAL: MEMS in biology and medicine MEMS in biology and medicine

    NASA Astrophysics Data System (ADS)

    Pruitt, Beth L.; Herr, Amy E.

    2011-05-01

    Stimulating—the first word that springs to mind regarding the emerging and expanding role of MEMS in biological inquiry. When invited to guest-edit this special issue on 'MEMS in biology and medicine' for JMM, we jumped at the opportunity. Partly owing to the breadth of the stimulating research in this nascent area and partly owing to the stimulating of biological function made possible with MEMS accessible length and time scales, we were eager to assemble manuscripts detailing some of the most cutting edge biological research being conducted around the globe. In addition to cutting edge engineering, this special issue features challenging biological questions addressed with innovative MEMS technologies. Topics span from Yetisen and colleagues' inquiry into quantifying pollen tube behaviour in response to pistil tissues [1] to Morimoto and colleagues' engineering efforts to produce monodisperse droplets capable of encapsulating single cells (without surface modification) [2]. Questions are bold, including a means to achieve therapeutically-relevant scaling for enrichment of leukocytes from blood (Inglis et al [3]), assessing the dependence of Escherichia coli biofilm formation on bacterial signalling (Meyer et al [4]), and elucidation of adhesion dynamics of circulating tumour cells (Cheung et al [5]) among others. Technologies are diverse, including microfabricated magnetic actuators (Lee et al [6]), stimuli-responsive polymer nanocomposites (Hess et al [7]), and SU-8 electrothermal microgrippers (Chu et al [8]) to name but a few. Contributing authors do indeed span a large swathe of the globe, with contributions from Australia, Italy, China, Canada, Denmark, Japan, the USA and numerous other locations. Collaboration finds a home here—with researchers from macromolecular science and electrical engineering collaborating with the Veterans Affairs Medical Center or neurosurgery researchers working with biological and electrical engineers. The questions posed by

  16. A new class of high force, low-voltage, compliant actuation system

    SciTech Connect

    RODGERS,M. STEVEN; KOTA,SRIDHAR; HETRICK,JOEL; LI,ZHE; JENSEN,BRIAN D.; KRYGOWSKI,THOMAS W.; MILLER,SAMUEL L.; BARNES,STEPHEN MATTHEW; BURG,MICHAEL STANLEY

    2000-04-10

    Although many actuators employing electrostatic comb drives have been demonstrated in a laboratory environment, widespread acceptance in mass produced microelectromechanical systems (MEMS) may be limited due to issues associated with low drive force, large real estate demands, high operating voltages, and reliability concerns due to stiction. On the other hand, comb drives require very low drive currents, offer predictable response, and are highly compatible with the fabrication technology. The expand the application space and facilitate the widespread deployment of self-actuated MEMS, a new class of advanced actuation systems has been developed that maintains the highly desirable aspects of existing components, while significantly diminishing the issues that could impede large scale acceptance. In this paper, the authors will present low-voltage electrostatic actuators that offer a dramatic increase in force over conventional comb drive designs. In addition, these actuators consume only a small fraction of the chip area previously used, yielding significant gains in power density. To increase the stroke length of these novel electrostatic actuators, the authors have developed highly efficient compliant stroke amplifiers. The coupling of compact, high-force actuators with fully compliant displacement multipliers sets a new paradigm for highly integrated microelectromechanical systems.

  17. Analysis of capacitive sensing for 2D-MEMS scanner laser projection

    NASA Astrophysics Data System (ADS)

    von Wantoch, Thomas; Mallas, Christian; Hofmann, Ulrich; Janes, Joachim; Wagner, Bernhard; Benecke, Wolfgang

    2014-03-01

    Typical applications for resonantly driven vacuum packaged MEMS scanners including laser projection displays require a feedback signal for closed-loop operation as well as high accuracy angle synchronization for data processing. A well known and widely used method is based on determining the angular velocity of the oscillating micromirror by measuring the time derivative of a capacitance. In this work we analyze a capacitive sensing approach that uses integrated vertical comb structures to synchronize the angular motion of a torsional micromirror oscillating in resonance. The investigated measurement method is implemented in a laser display that generates a video projection by scanning a RBG laser beam. As the 2D-micromirror performs sinusoidal oscillations on both perpendicular axes a continuously moving Lissajous pattern is projected. By measuring the displacement current due to an angular deflection of the movable comb structures an appropriate feedback signal for actuation and data synchronization is computed. In order to estimate the angular deflection and velocity a mathematical model of the capacitive sensing system is presented. In particular, the nonlinear characteristic of the capacitance as a function of the angle that is calculated using FEM analysis is approximated using cubic splines. Combining this nonlinear function with a dynamic model of the micromirror oscillation and the analog electronics a mathematical model of the capacitive measurement system is derived. To evaluate the proposed model numerical simulations are realized using MATLAB/Simulink and are compared to experimental measurements.

  18. MEMS Rate Sensors for Space

    NASA Technical Reports Server (NTRS)

    Gambino, Joel P.

    1999-01-01

    Micromachined Electro Mechanical System Rate sensors offer many advantages that make them attractive for space use. They are smaller, consume less power, and cost less than the systems currently available. MEMS Rate Sensors however, have not been optimized for use on spacecraft. This paper describes an approach to developing MEMS Rate Sensors systems for space use.

  19. Development of high-order segmented MEMS deformable mirrors

    NASA Astrophysics Data System (ADS)

    Helmbrecht, Michael A.; He, Min; Kempf, Carl J.

    2012-03-01

    The areas of biological microscopy, ophthalmic research, and atmospheric turbulence correction require high-order DMs to obtain diffraction-limited images. Iris AO has been developing high-order MEMS DMs to address these requirements. Recent development has resulted in fully functional 489-actuator DMs capable of 9.5 µm stroke. For laser applications, the DMs were modified to make them compatible with high-reflectance dielectric coatings. Experimental results for the 489-actuator DMs with dielectric coatings shows they can be made with superb optical quality λ/93.3 rms (11.4 nm rms) and λ/75.9 rms (20.3 nm rms) for 1064 nm and 1540 nm coatings. Laser testing has demonstrated 300 W/cm2 power handling with off-the-shelf packaging. Power handling of 2800 W/cm2 is projected when incorporating packaging optimized for heat transfer.

  20. Polycrystalline diamond MEMS resonator technology for sensor applications.

    SciTech Connect

    Sullivan, John P.; Aslam, Dean; Sepulveda-Alancastro, Nelson

    2005-07-01

    Due to material limitations of poly-Si resonators, polycrystalline diamond (poly-C) has been explored as a new MEMS resonator material. The poly-C resonators are designed, fabricated and tested using electrostatic (Michigan State University) and piezoelectric (Sandia National Laboratories) actuation methods, and the results are compared. For comparable resonator structures, although the resonance frequencies are similar, the measured Q values in the ranges of 1000-2000 and 10,000-15,000 are obtained for electrostatic and piezoelectric actuation methods, respectively. The difference in Q for the two methods is related to different pressures used during the measurement and not to the method of measurement. For the poly-C cantilever beam resonators, the highest value of their quality factor (Q) is reported for the first time (15,263).

  1. Micro Electromechanical Systems (MEMS) Based Microfluidic Devices for Biomedical Applications.

    PubMed

    Ashraf, Muhammad Waseem; Tayyaba, Shahzadi; Afzulpurkar, Nitin

    2011-01-01

    Micro Electromechanical Systems (MEMS) based microfluidic devices have gained popularity in biomedicine field over the last few years. In this paper, a comprehensive overview of microfluidic devices such as micropumps and microneedles has been presented for biomedical applications. The aim of this paper is to present the major features and issues related to micropumps and microneedles, e.g., working principles, actuation methods, fabrication techniques, construction, performance parameters, failure analysis, testing, safety issues, applications, commercialization issues and future prospects. Based on the actuation mechanisms, the micropumps are classified into two main types, i.e., mechanical and non-mechanical micropumps. Microneedles can be categorized according to their structure, fabrication process, material, overall shape, tip shape, size, array density and application. The presented literature review on micropumps and microneedles will provide comprehensive information for researchers working on design and development of microfluidic devices for biomedical applications.

  2. Micro Electromechanical Systems (MEMS) Based Microfluidic Devices for Biomedical Applications

    PubMed Central

    Ashraf, Muhammad Waseem; Tayyaba, Shahzadi; Afzulpurkar, Nitin

    2011-01-01

    Micro Electromechanical Systems (MEMS) based microfluidic devices have gained popularity in biomedicine field over the last few years. In this paper, a comprehensive overview of microfluidic devices such as micropumps and microneedles has been presented for biomedical applications. The aim of this paper is to present the major features and issues related to micropumps and microneedles, e.g., working principles, actuation methods, fabrication techniques, construction, performance parameters, failure analysis, testing, safety issues, applications, commercialization issues and future prospects. Based on the actuation mechanisms, the micropumps are classified into two main types, i.e., mechanical and non-mechanical micropumps. Microneedles can be categorized according to their structure, fabrication process, material, overall shape, tip shape, size, array density and application. The presented literature review on micropumps and microneedles will provide comprehensive information for researchers working on design and development of microfluidic devices for biomedical applications. PMID:21747700

  3. Series elastic actuators

    NASA Astrophysics Data System (ADS)

    Williamson, Matthew M.

    1995-01-01

    This thesis presents the design, construction, control and evaluation of a novel for controlled actuator. Traditional force controlled actuators are designed from the premise that 'Stiffer is better'. This approach gives a high bandwidth system, prone to problems of contact instability, noise, and low power density. The actuator presented in this thesis is designed from the premise that 'Stiffness isn't everything'. The actuator, which incorporates a series elastic element, trades off achievable bandwidth for gains in stable, low noise force control, and protection against shock loads. This thesis reviews related work in robot force control, presents theoretical descriptions of the control and expected performance from a series elastic actuator, and describes the design of a test actuator constructed to gather performance data. Finally the performance of the system is evaluated by comparing the performance data to theoretical predictions.

  4. Effective Actuation: High Bandwidth Actuators and Actuator Scaling Laws

    DTIC Science & Technology

    2007-11-02

    5c. PROGRAM ELEMENT NUMBER I-ioh Bandwidth Actiintorv and Actuator 9clinp Iaw-, 65502F 6. AUTHOR(S) 5d. PROJECT NUMBER A. B. Cain, G. R. Raman , and E...of possible applications include the high frequency excitation for supprc~sion of flow induced resonance in weapons bay cavities (see Raman et al...systems. Adaptive high bandwidth actuators are required to adapt to changes in flow speed and conditions during flight. Raman et al. (2000) and Stanek et

  5. Open-loop versus closed-loop control of MEMS devices: choices and issues

    NASA Astrophysics Data System (ADS)

    Borovic, B.; Liu, A. Q.; Popa, D.; Cai, H.; Lewis, F. L.

    2005-10-01

    From a controls point of view, micro electromechanical systems (MEMS) can be driven in an open-loop and closed-loop fashion. Commonly, these devices are driven open-loop by applying simple input signals. If these input signals become more complex by being derived from the system dynamics, we call such control techniques pre-shaped open-loop driving. The ultimate step for improving precision and speed of response is the introduction of feedback, e.g. closed-loop control. Unlike macro mechanical systems, where the implementation of the feedback is relatively simple, in the MEMS case the feedback design is quite problematic, due to the limited availability of sensor data, the presence of sensor dynamics and noise, and the typically fast actuator dynamics. Furthermore, a performance comparison between open-loop and closed-loop control strategies has not been properly explored for MEMS devices. The purpose of this paper is to present experimental results obtained using both open- and closed-loop strategies and to address the comparative issues of driving and control for MEMS devices. An optical MEMS switching device is used for this study. Based on these experimental results, as well as computer simulations, we point out advantages and disadvantages of the different control strategies, address the problems that distinguish MEMS driving systems from their macro counterparts, and discuss criteria to choose a suitable control driving strategy.

  6. Characterization of PolyMUMPs-based in-plane electromagnetic actuator

    NASA Astrophysics Data System (ADS)

    Ahmed, Mawahib Gafare; Dennis, John-Ojur; Khir, Mohd-Haris; Rabih, Almur; Mian, Muhammad Umer

    2016-11-01

    This paper presents a synopsis of the design and fabrication of an in-plane electromagnetic actuator using Polysilicon Multi-Users MEMS Process (PolyMUMPs). The electromagnetic actuator is driven by Lorentz force. This article is based on the premise that the proportionality of Lorentz force to magnetic field and driving current controls lateral displacement. The fabricated actuator consists of two plates; moving plate supported by four beams and a stationary plate in order to form a capacitor setup for sensing. This work experimentally demonstrates the actuation of the device using low frequencies of 0.5 Hz, 1 Hz and 2Hz. The characterization of the micro actuator using a Leica optical microscope showed a displacement exceeding 8 µm. This displacement is attained with a magnetic field of 20mT and applied current of approximately 5 mA.

  7. Development of highly integrated magetically and electrostatically actuated micropumps : LDRD 64709 final report.

    SciTech Connect

    Sosnowchik, Brian D.; Galambos, Paul C.; Hendrix, Jason R.; Zwolinski, Andrew

    2003-12-01

    The pump and actuator systems designed and built in the SUMMiT{trademark} process, Sandia's surface micromachining polysilicon MEMS (Micro-Electro-Mechanical Systems) fabrication technology, on the previous campus executive program LDRD (SAND2002-0704P) with FSU/FAMU (Florida State University/Florida Agricultural and Mechanical University) were characterized in this LDRD. These results demonstrated that the device would pump liquid against the flow resistance of a microfabricated channel, but the devices were determined to be underpowered for reliable pumping. As a result a new set of SUMMiT{trademark} pumps with actuators that generate greater torque will be designed and submitted for fabrication. In this document we will report details of dry actuator/pump assembly testing, wet actuator/pump testing, channel resistance characterization, and new pump/actuator design recommendations.

  8. Hydraulic Actuator Project

    DTIC Science & Technology

    2003-11-01

    Hydraulic Actuator Project Stakeholder meeting held 7- 8 October in Los Angeles; 58 attendees representing aircraft and actuator OEMs, seal...PERFORMING ORGANIZATION NAME(S) AND ADDRESS(ES) Naval Research Laboratory,4555 Overlook Ave., SW ,Washington,DC,20375 8 . PERFORMING ORGANIZATION REPORT...unclassified c. THIS PAGE unclassified Standard Form 298 (Rev. 8 -98) Prescribed by ANSI Std Z39-18 Actuator JTP: Coupon Testing Substrate

  9. Remote switch actuator

    DOEpatents

    Haas, Edwin Gerard; Beauman, Ronald; Palo, Jr., Stefan

    2013-01-29

    The invention provides a device and method for actuating electrical switches remotely. The device is removably attached to the switch and is actuated through the transfer of a user's force. The user is able to remain physically removed from the switch site obviating need for protective equipment. The device and method allow rapid, safe actuation of high-voltage or high-current carrying electrical switches or circuit breakers.

  10. Electrostatically Driven Nanoballoon Actuator.

    PubMed

    Barzegar, Hamid Reza; Yan, Aiming; Coh, Sinisa; Gracia-Espino, Eduardo; Dunn, Gabriel; Wågberg, Thomas; Louie, Steven G; Cohen, Marvin L; Zettl, Alex

    2016-11-09

    We demonstrate an inflatable nanoballoon actuator based on geometrical transitions between the inflated (cylindrical) and collapsed (flattened) forms of a carbon nanotube. In situ transmission electron microscopy experiments employing a nanoelectromechanical manipulator show that a collapsed carbon nanotube can be reinflated by electrically charging the nanotube, thus realizing an electrostatically driven nanoballoon actuator. We find that the tube actuator can be reliably cycled with only modest control voltages (few volts) with no apparent wear or fatigue. A complementary theoretical analysis identifies critical parameters for nanotube nanoballoon actuation.

  11. Improved Electrohydraulic Linear Actuators

    NASA Technical Reports Server (NTRS)

    Hamtil, James

    2004-01-01

    A product line of improved electrohydraulic linear actuators has been developed. These actuators are designed especially for use in actuating valves in rocket-engine test facilities. They are also adaptable to many industrial uses, such as steam turbines, process control valves, dampers, motion control, etc. The advantageous features of the improved electrohydraulic linear actuators are best described with respect to shortcomings of prior electrohydraulic linear actuators that the improved ones are intended to supplant. The flow of hydraulic fluid to the two ports of the actuator cylinder is controlled by a servo valve that is controlled by a signal from a servo amplifier that, in turn, receives an analog position-command signal (a current having a value between 4 and 20 mA) from a supervisory control system of the facility. As the position command changes, the servo valve shifts, causing a greater flow of hydraulic fluid to one side of the cylinder and thereby causing the actuator piston to move to extend or retract a piston rod from the actuator body. A linear variable differential transformer (LVDT) directly linked to the piston provides a position-feedback signal, which is compared with the position-command signal in the servo amplifier. When the position-feedback and position-command signals match, the servo valve moves to its null position, in which it holds the actuator piston at a steady position.

  12. Tuneable Auxiliary Control Mechanisms For RUM Actuators

    NASA Technical Reports Server (NTRS)

    Polites, Michael E.; Alhorn, Dean C.

    1995-01-01

    Tuneable auxiliary control mechanisms for rotating unbalanced-mass (RUM) actuators used to maximize scan amplitudes and/or minimize power consumption during changing conditions. This type of mechanism more sophisticated version of type of mechanism described in "Auxiliary Control Mechanisms for RUM Actuators" (MFS-28817). Torsional stiffness of torsionally flexible coupling made adjustable on command. Torsionally flexible coupling in tuneable version of auxiliary control mechanism adjustable by use of stepping-motor-driven worm-gear mechanism that varies bending length of flexible blade.

  13. Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics

    SciTech Connect

    Acheli, A. Serhane, R.

    2015-03-30

    This paper presents the studies of mechanical behavior of MEMS cantilever beam made of poly-silicon material, using the coupling of three application modes (plane strain, electrostatics and the moving mesh) of COMSOL Multi-physics software. The cantilevers playing a key role in Micro Electro-Mechanical Systems (MEMS) devices (switches, resonators, etc) working under potential shock. This is why they require actuation under predetermined conditions, such as electrostatic force or inertial force. In this paper, we present mechanical behavior of a cantilever actuated by an electrostatic force. In addition to the simplification of calculations, the weight of the cantilever was not taken into account. Different parameters like beam displacement, electrostatics force and stress over the beam have been calculated by finite element method after having defining the geometry, the material of the cantilever model (fixed at one of ends but is free to move otherwise) and his operational space.

  14. MEMS tunable terahertz metamaterials using out-of-plane mechanisms

    NASA Astrophysics Data System (ADS)

    Lin, Yu-Sheng; Pitchappa, Prakash; Ho, Chong Pei; Lee, Chengkuo

    2015-03-01

    The tunable terahertz metamaterial (TTM) has attracted intense research interest, since the electromagnetic response of the metamaterial can be actively controlled through external stimulus, which is of great significance in real time applications. The active control of metamaterial characteristics is crucial in order to provide a flexible and versatile platform for mimicking fundamental physical effects. To realize the electromagnetic tunability, various approaches have been demonstrated to increase the flexibility in applications, such as changing the effective electromagnetic properties. Alternatively, MEMS-based techniques are well developed. The structural reconfiguration is a straightforward way to control the electromagnetic properties. The metamaterial properties can be directly modified by reconfiguring the unit cell which is the fundamental building block of metamaterials. Currently, our research works are focusing on MEMS-based TTM adopting stress-induced curved actuators (SICA) to adjust the resonant frequency of devices. Herein, the proposed TTM designs are double split-ring resonator (DSRR), electric split-ring resonator (eSRR), Omega-ring metamaterial (ORM), symmetric and asymmetric T-shape metamaterial (STM and ATM), respectively. We demonstrated these TTM can be active, continuous, and recoverable control the resonant frequency by using electrostatic or electrothermal actuation mechanism. Therefore, the TTM devices can be effectively used for sensors, optical switches, and filters applications.

  15. Integrated microphotonic-MEMS inertial sensors

    NASA Astrophysics Data System (ADS)

    Zandi, Kazem

    The objective of this thesis is to design, simulate, fabricate and characterize high sensitive low cost in-plane photonic-band-gap (PBG)-micro electromechanical systems (MEMS)-based miniature accelerometers and rotational rate sensors (gyroscopes) on a silicon-on-insulator (SOI) substrate in order to enable the integration of an array of two-axis of these sensors on a single SOI platform. Use of guided-wave optical devices integrated with MEMS on SOI for multichannel/multifunction sensor systems allows the use of multiple sensors to extend the measurement range and accuracy. This provides essential redundancy which makes long-term reliability in the space environment possible therefore reducing the possibility of system failure. The navigator microchip also represents the ability of accommodating diverse attitude and inertial sensors on the same microchip to eliminate the need of many separate sensors. The end product exhibits orders of magnitude reduction in system mass and size. Furthermore, redundancy improves the net performance and precision of the navigation measurement systems. Two classes of optical accelerometers/gyroscopes are considered in this thesis for application in smallsats navigation, one based on tunable Fabry-Perot (FP) filter, where the sensor is actuated by the applied acceleration providing a shift in the operating wavelength that varies linearly with the applied acceleration and the other one based on variable optical attenuator (VOA), where the sensor is actuated by the applied acceleration providing a linear change for small displacements around the waveguide propagation axis in the relative signal intensity with the applied acceleration. In the case of FP-based sensors, the FP microcavity consists of two distributed Bragg reflectors (DBR) in which one DBR mirror is attached to the proof mass of the system. As a consequence of acceleration/rotation, the relative displacement of the movable mirror with respect to the fixed mirror changes

  16. Self-actuated device

    DOEpatents

    Hecht, Samuel L.

    1984-01-01

    A self-actuated device, of particular use as a valve or an orifice for nuclear reactor fuel and blanket assemblies, in which a gas produced by a neutron induced nuclear reaction gradually accumulates as a function of neutron fluence. The gas pressure increase occasioned by such accumulation of gas is used to actuate the device.

  17. Remotely controllable actuating device

    NASA Technical Reports Server (NTRS)

    McKillip, Jr., Robert M. (Inventor)

    1998-01-01

    An actuating device can change a position of an active member that remains in substantially the same position in the absence of a force of a predetermined magnitude on the active member. The actuating device comprises a shape-memory alloy actuating member for exerting a force when actuated by changing the temperature thereof, which shape-memory alloy actuating member has a portion for connection to the active member for exerting thereon a force having a magnitude at least as large as the predetermined magnitude for moving the active member to a desired position. Actuation circuitry is provided for actuating the shape-memory alloy actuating member by changing the temperature thereof only for the time necessary to move the active member to the desired position. The invention is particularly useful for changing the position of a camber-adjusting tab on a helicopter rotor blade by using two shape-memory alloy members that can act against each other to adjust dynamic properties of the rotor blade as it is rotating.

  18. Massively Redundant Electromechanical Actuators

    DTIC Science & Technology

    2014-08-30

    date of determination). DoD Controlling Office is (insert controlling DoD office). "Massively Redundant Electromechanical Actuators" August... electromechanical systems) processes are used to manufacture reliable and reproducible stators and sliders for the actuators. These processes include

  19. Friction of different monolayer lubricants in MEMs interfaces.

    SciTech Connect

    Carpick, Robert W. (University of Wisconsin, Madison, WI); Street, Mark D.; Ashurst, William Robert; Corwin, Alex David

    2006-01-01

    This report details results from our last year of work (FY2005) on friction in MEMS as funded by the Campaign 6 program for the Microscale Friction project. We have applied different monolayers to a sensitive MEMS friction tester called the nanotractor. The nanotractor is also a useful actuator that can travel {+-}100 {micro}m in 40 nm steps, and is being considered for several MEMS applications. With this tester, we can find static and dynamic coefficients of friction. We can also quantify deviations from Amontons' and Coulomb's friction laws. Because of the huge surface-to-volume ratio at the microscale, surface properties such as adhesion and friction can dominate device performance, and therefore such deviations are important to quantify and understand. We find that static and dynamic friction depend on the monolayer lubricant applied. The friction data can be modeled with a non-zero adhesion force, which represents a deviation from Amontons' Law. Further, we show preliminary data indicating that the adhesion force depends not only on the monolayer, but also on the normal load applied. Finally, we also observe slip deflections before the transition from static to dynamic friction, and find that they depend on the monolayer.

  20. Study of scratch drive actuator force characteristics

    NASA Astrophysics Data System (ADS)

    Li, Lijie; Brown, J. Gordon; Uttamchandani, Deepak

    2002-11-01

    Microactuators are one of the key components in MEMS technology, and various designs have been realized through different fabrication processes. One type of microactuator commonly used is the scratch drive actuator (SDA) that is frequently fabricated by surface micromachining processes. An experimental investigation has been conducted on the force characteristics of SDAs fabricated using the JDSU Microsystems MUMPs process. One-, two-, three- and four-plate SDAs connected to box-springs have been designed and fabricated for these experiments using MUMPs run 44. The spring constant for the box-springs has been calculated by FEM using ANSYS software. The product of the spring constant and spring extension is used to measure the forces produced by these SDAs. It is estimated that the forces produced exceed 250 μN from a one-plate SDA and 850 μN from a four-plate SDA.

  1. Superhydrophobic Surface Coatings for Microfluidics and MEMs.

    SciTech Connect

    Branson, Eric D.; Singh, Seema; Houston, Jack E.; van Swol, Frank B.; Brinker, C. Jeffrey

    2006-11-01

    Low solid interfacial energy and fractally rough surface topography confer to Lotus plants superhydrophobic (SH) properties like high contact angles, rolling and bouncing of liquid droplets, and self-cleaning of particle contaminants. This project exploits the porous fractal structure of a novel, synthetic SH surface for aerosol collection, its self-cleaning properties for particle concentration, and its slippery nature 3 to enhance the performance of fluidic and MEMS devices. We propose to understand fundamentally the conditions needed to cause liquid droplets to roll rather than flow/slide on a surface and how this %22rolling transition%22 influences the boundary condition describing fluid flow in a pipe or micro-channel. Rolling of droplets is important for aerosol collection strategies because it allows trapped particles to be concentrated and transported in liquid droplets with no need for a pre-defined/micromachined fluidic architecture. The fluid/solid boundary condition is important because it governs flow resistance and rheology and establishes the fluid velocity profile. Although many research groups are exploring SH surfaces, our team is the first to unambiguously determine their effects on fluid flow and rheology. SH surfaces could impact all future SNL designs of collectors, fluidic devices, MEMS, and NEMS. Interfaced with inertial focusing aerosol collectors, SH surfaces would allow size-specific particle populations to be collected, concentrated, and transported to a fluidic interface without loss. In microfluidic systems, we expect to reduce the energy/power required to pump fluids and actuate MEMS. Plug-like (rather than parabolic) velocity profiles can greatly improve resolution of chip-based separations and enable unprecedented control of concentration profiles and residence times in fluidic-based micro-reactors. Patterned SH/hydrophilic channels could induce mixing in microchannels and enable development of microflow control elements

  2. Ovenized microelectromechanical system (MEMS) resonator

    SciTech Connect

    Olsson, Roy H; Wojciechowski, Kenneth; Kim, Bongsang

    2014-03-11

    An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.

  3. Optically transduced MEMS magnetometer

    DOEpatents

    Nielson, Gregory N; Langlois, Eric

    2014-03-18

    MEMS magnetometers with optically transduced resonator displacement are described herein. Improved sensitivity, crosstalk reduction, and extended dynamic range may be achieved with devices including a deflectable resonator suspended from the support, a first grating extending from the support and disposed over the resonator, a pair of drive electrodes to drive an alternating current through the resonator, and a second grating in the resonator overlapping the first grating to form a multi-layer grating having apertures that vary dimensionally in response to deflection occurring as the resonator mechanically resonates in a plane parallel to the first grating in the presence of a magnetic field as a function of the Lorentz force resulting from the alternating current. A plurality of such multi-layer gratings may be disposed across a length of the resonator to provide greater dynamic range and/or accommodate fabrication tolerances.

  4. MEMS electrostatic influence machines

    NASA Astrophysics Data System (ADS)

    Phu Le, Cuong; Halvorsen, Einar

    2016-11-01

    This paper analyses the possibility of MEMS electrostatic influence machines using electromechanical switches like the historical predecessors did two centuries ago. We find that a generator design relying entirely on standard silicon-on-insulator(SOI) micromachining is conceivable and analyze its performance by simulations. The concept appears preferable over comparable diode circuits due to its higher maximum energy, faster charging and low precharging voltage. A full electromechanical lumped-model including parasitic capacitances of the switches is built to capture the dynamic of the generator. Simulation results show that the output voltage can be exponentially bootstrapped from a very low precharging voltage so that otherwise inadequately small voltage differences or charge imbalances can be made useful.

  5. Polyaniline-Carbon Nanotubes Composite Actuators

    NASA Astrophysics Data System (ADS)

    Rosa, Sabrina; Camargo, Carlos; Campo, Eva; Esteve, Jaume; Ramos, Idalia

    2012-02-01

    The understanding of photoactuation in Carbon Nanotubes (CNT)-polymer composites can contribute to the development of micro- and nano-optical-mechanical systems for applications that include intracellular motors, artificial muscles, and tactile displays for blind people. The integration of CNTs into polymers combines the good processability of polymers with the functional properties of CNTs. CNTs-polymer composite fibers were fabricated using the electrospinning technique. electrospinning process orients the CNTs along the precursor stream and can contribute to enhance photo actuation properties. The addition of polyaniline, an electroactive conductive polymer is expected to enhance the actuation strain of the composite. aim of this research is to study photoactuation in MWCNT-Polyanilile electrospun fibers. fibers were characterized using Scanning Electron Microscopy, Atomic Force Microscopy, and X-Ray Diffraction. Results demonstrate evidence of photo-actuation after irradiating the fibers with visible light. tests are being conducted to understand the mechanisms of the composites response to light stimulation.

  6. Squeeze film flow analysis of pulsed microjet actuators

    NASA Astrophysics Data System (ADS)

    Roman, Max

    2005-11-01

    Microfabrication (MEMS) offers a platform to build miniaturized inexpensive, reliable, light-weight, and low power actuators and sensors. Such small actuators can have a very unique function in microfluidics, where they can serve as micromixers, pumps, and non-invasive cell manipulators. In this work, theoretical modeling and computer simulation is used to analyze pulsed microjet actuators. We have derived a low dimensional theoretical model, which takes into account the coupling between the electrostatic actuation, the solid deformation of the membrane, and the squeeze flow in the cavity. The pressure generated in the cavity by the deforming membrane is described in terms of actuation frequency and membrane deflection amplitude. The cavity pressure characterizes the performance of the microjet, which is measured in terms of nozzle exit velocity, and the microjet's operation is optimized for a minimum voltage input. To validate the model, we use computer simulation to evaluate the pressure and the nozzle exit velocity over the range of parameters of the problem.

  7. On-Chip Micro-Electro-Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing.

    PubMed

    Erfan, Mazen; Sabry, Yasser M; Sakr, Mohammad; Mortada, Bassem; Medhat, Mostafa; Khalil, Diaa

    2016-05-01

    In this work, we study the detection of acetylene (C2H2), carbon dioxide (CO2) and water vapor (H2O) gases in the near-infrared (NIR) range using an on-chip silicon micro-electro-mechanical system (MEMS) Fourier transform infrared (FT-IR) spectrometer in the wavelength range 1300-2500 nm (4000-7692 cm(-1)). The spectrometer core engine is a scanning Michelson interferometer micro-fabricated using a deep-etching technology producing self-aligned components. The light is free-space propagating in-plane with respect to the silicon chip substrate. The moving mirror of the interferometer is driven by a relatively large stroke electrostatic comb-drive actuator corresponding to about 30 cm(-1) resolution. Multi-mode optical fibers are used to connect light between the wideband light source, the interferometer, the 10 cm gas cell, and the optical detector. A wide dynamic range of gas concentration down to 2000 parts per million (ppm) in only 10 cm length gas cell is demonstrated. Extending the wavelength range to the mid-infrared (MIR) range up to 4200 nm (2380 cm(-1)) is also experimentally demonstrated, for the first time, using a bulk micro-machined on-chip MEMS FT-IR spectrometer. The obtained results open the door for an on-chip optical gas sensor for many applications including environmental sensing and industrial process control in the NIR/MIR spectral ranges.

  8. Mechanical Properties of MEMS Materials

    DTIC Science & Technology

    2004-03-01

    thermal strain for polysilicon (data points) compared with bulk silicon (Thermophysical Properties of Matter, Volume 13, Y. S. Touloukian , Editor...AFRL-IF-RS-TR-2004-76 Final Technical Report March 2004 MECHANICAL PROPERTIES OF MEMS MATERIALS Johns Hopkins University...TITLE AND SUBTITLE MECHANICAL PROPERTIES OF MEMS MATERIALS 6. AUTHOR(S) W. N. Sharpe, Jr., K. J. Hemker - Dept of Mechanical Engineering R. L

  9. MemAxes Visualization Software

    SciTech Connect

    2014-08-28

    Hardware advancements such as Intel's PEBS and AMD's IBS, as well as software developments such as the perf_event API in Linux have made available the acquisition of memory access samples with performance information. MemAxes is a visualization and analysis tool for memory access sample data. By mapping the samples to their associated code, variables, node topology, and application dataset, MemAxes provides intuitive views of the data.

  10. Preliminary characterization of active MEMS valves.

    SciTech Connect

    Barnard, Casey Anderson

    2010-08-01

    Partial characterization of a series of electrostatically actuated active microfluidic valves is to be performed. Tests are performed on a series of 24 valves from two different MEMS sets. Focus is on the physical deformation of the structures under variable pressure loadings, as well as voltage levels. Other issues that inhibit proper performance of the valves are observed, addressed and documented as well. Many microfluidic applications have need for the distribution of gases at finely specified pressures and times. To this end a series of electrostatically actuated active valves have been fabricated. Eight separate silicon die are discussed, each with a series of four active valves present. The devices are designed such that the valve boss is held at a ground, with a voltage applied to lower contacts. Resulting electrostatic forces pull the boss down against a series of stops, intended to create a seal as well as prevent accidental shorting of the device. They have been uniquely packaged atop a stack of material layers, which have inlaid channels for application of fluid flow to the backside of the valve. Electrical contact is supplied from the underlying printed circuit board, attached to external supplies and along traces on the silicon. Pressure is supplied from a reservoir of house compressed air, up to 100 Psig. This is routed through a Norgren R07-200-RGKA pressure regulator, rated to 150 Psig. From there flow passes a manually operated ball valve, and to a flow meter. Two flow meters were utilized; initially an Omega FMA1802 rated at 10 sccm, and followed by a Flocat model for higher flow rates up to 100 sccm. An Omega DPG4000-500 pressure gauge produced pressure measurements. Optical measurements were returned via a WYKO Interferometry probe station. This would allow for determination of physical deformations of the device under a variety of voltage and pressure loads. This knowledge could lead to insight as to the failure mechanisms of the device

  11. System approach to MEMS commercialization

    NASA Astrophysics Data System (ADS)

    Vaganov, Vladimir I.; Belov, Nickolai; in't Hout, Sebastiaan R.

    2003-04-01

    It is common to underestimate the challenges of integrating the at least four technologies in any MEMS product: the three technologies of any semiconductor device (electronics, packaging and testing) plus the MEMS microstructure. For some specific areas of application, for example for photonics, optics technology/components must also be integrated. While traditional semiconductor devices utilize standardized and inexpensive packaging and testing procedures and equipment, MEMS require custom solutions that introduce multiple physical domains, such as light in the case of photonics, directly to a potentially moving structure on the die. This heightened complexity coupled with nonstandard packaging, testing and other (optics) technologies has a dramatic impact on functionality, reliability and cost. Being developed and successfully proven for a period of about twenty-five years the System Approach to MEMS Commercialization is based on three major principles: A priori understanding of the interdependence of technologies integrated into MEMS products: micro-machining, IC technology, packaging, testing and other (optics) technologies. Parallel development or implementation of these technologies within the MEMS product. Redistribution of manufacturing complexity from individual to batch realm. Integrating packaging and testing and other (optics) components into the microstructure and including some of the testing and functional algorithms in the ASIC reduce cost by simplifying more expensive individual manufacturing steps. The overall results of redistribution complexity from individual manufacturing technologies into batch manufacturing technologies are dramatic cost reduction, performance and quality improvement and shorter time to market.

  12. Cryogenic Piezoelectric Actuator

    NASA Technical Reports Server (NTRS)

    Jiang, Xiaoning; Cook, William B.; Hackenberger, Wesley S.

    2009-01-01

    In this paper, PMN-PT single crystal piezoelectric stack actuators and flextensional actuators were designed, prototyped and characterized for space optics applications. Single crystal stack actuators with footprint of 10 mm x10 mm and the height of 50 mm were assembled using 10 mm x10mm x0.15mm PMN-PT plates. These actuators showed stroke > 65 - 85 microns at 150 V at room temperature, and > 30 microns stroke at 77 K. Flextensional actuators with dimension of 10mm x 5 mm x 7.6 mm showed stroke of >50 microns at room temperature at driving voltage of 150 V. A flextensional stack actuator with dimension of 10 mm x 5 mm x 47 mm showed stroke of approx. 285 microns at 150 V at room temperature and > 100 microns at 77K under driving of 150 V should be expected. The large cryogenic stroke and high precision of these actuators are promising for cryogenic optics applications.

  13. Static and dynamic analysis of a four-tube piezoelectric actuator.

    PubMed

    Ma, Yuting; Feng, Zhihua; Pan, Chengliang; Kong, Fanrang

    2009-06-01

    Piezoelectric tubes with film electrodes on their outer and inner surfaces can be used to compose multitube actuators. The actuator of four piezoelectric tubes can substitute the traditional single-tube actuator with quartered electrodes which has been widely used in scanning probe microscopy and piezoelectric motors. In this article, the static deflection, static bending moment, resonant frequency, and dynamic deflection of the four-tube actuator are all studied in detail. The comparison between this actuator and the traditional single-tube actuator is also done and the results show that the four-tube actuator has better performances under certain conditions. The experiment results of a prototype actuator testified the validation of the analysis.

  14. MEMS Lens Scanners for Free-Space Optical Interconnects

    NASA Astrophysics Data System (ADS)

    Chou, Jeffrey Brian

    Optical interconnects are the next evolutionary step for computer server systems, replacing traditional copper interconnects to increase communication bandwidth and reduce overall power consumption. A variety of implementation techniques to bring optics to the rack-to-rack, board-to-board, and chip-to-chip scale are heavily pursued in the research space. In this dissertation we present a micro-electro mechanical systems (MEMS) based free-space optical link for board-to-board interconnects. As with any free-space optical system, alignment is critical for the correction of undesired vibrations or offsets. Thus our optical system implements a variety of MEMS based lens scanners and opto-electronic feedback loops to maintain constant alignment despite both high frequency and low frequency misalignments. The full implementation of all of the MEMS devices is discussed, including the design, simulation, fabrication, characterization, and the demonstration of the full optical link. The first device discussed is an electrostatic lens scanner with an optoelectronic feedback loop capable of tracking high frequency mechanical vibrations expected in computer server systems. The second system discussed is an electrothermal lens scanner with mechanical brakes for long term, large displacement, and zero power off-state tracking. Both linear and rotational actuators are presented to correct for the major causes of misalignment measured in board-to-board systems. A finite state machine based controller is demonstrated to act as the feedback loop required to maintain alignment. A fully integrated packaging system is proposed for the correction of all misalignment degrees of freedom. Finally, an alternative application of MEMS lens scanners for light detection and ranging (LIDAR) for 3D imaging is explored, tested, and simulated.

  15. A novel dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection.

    PubMed

    Xiong, Zhuang; Mairiaux, Estelle; Walter, Benjamin; Faucher, Marc; Buchaillot, Lionel; Legrand, Bernard

    2014-10-31

    In order to effectively increase the resonance frequency and the quality factor of atomic force microscope (AFM) probes, a novel oscillating probe based on a dog-bone shaped MEMS resonator was conceived, designed, fabricated and evaluated. The novel probe with 400 μm in length, 100 μm in width and 5 μm in thickness was enabled to feature MHz resonance frequencies with integrated thermal actuation and piezoresistive detection. Standard silicon micromachining was employed. Both electrical and optical measurements were carried out in air. The resonance frequency and the quality factor of the novel probe were measured to be 5.4 MHz and 4000 respectively, which are much higher than those (about several hundreds of kHz) of commonly used cantilever probes. The probe was mounted onto a commercial AFM set-up through a dedicated probe-holder and circuit board. Topographic images of patterned resist samples were obtained. It is expected that the resonance frequency and the measurement bandwidth of such probes will be further increased by a proper downscaling, thus leading to a significant increase in the scanning speed capability of AFM instruments.

  16. A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection †

    PubMed Central

    Xiong, Zhuang; Mairiaux, Estelle; Walter, Benjamin; Faucher, Marc; Buchaillot, Lionel; Legrand, Bernard

    2014-01-01

    In order to effectively increase the resonance frequency and the quality factor of atomic force microscope (AFM) probes, a novel oscillating probe based on a dog-bone shaped MEMS resonator was conceived, designed, fabricated and evaluated. The novel probe with 400 μm in length, 100 μm in width and 5 μm in thickness was enabled to feature MHz resonance frequencies with integrated thermal actuation and piezoresistive detection. Standard silicon micromachining was employed. Both electrical and optical measurements were carried out in air. The resonance frequency and the quality factor of the novel probe were measured to be 5.4 MHz and 4000 respectively, which are much higher than those (about several hundreds of kHz) of commonly used cantilever probes. The probe was mounted onto a commercial AFM set-up through a dedicated probe-holder and circuit board. Topographic images of patterned resist samples were obtained. It is expected that the resonance frequency and the measurement bandwidth of such probes will be further increased by a proper downscaling, thus leading to a significant increase in the scanning speed capability of AFM instruments. PMID:25365463

  17. A Compact and Low-Cost MEMS Loudspeaker for Digital Hearing Aids.

    PubMed

    Sang-Soo Je; Rivas, F; Diaz, R E; Jiuk Kwon; Jeonghwan Kim; Bakkaloglu, B; Kiaei, S; Junseok Chae

    2009-10-01

    A microelectromechanical-systems (MEMS)-based electromagnetically actuated loudspeaker to reduce form factor, cost, and power consumption, and increase energy efficiency in hearing-aid applications is presented. The MEMS loudspeaker has multilayer copper coils, an NiFe soft magnet on a thin polyimide diaphragm, and an NdFeB permanent magnet on the perimeter. The coil impedance is measured at 1.5 Omega, and the resonant frequency of the diaphragm is located far from the audio frequency range. The device is driven by a power-scalable, 0.25-mum complementary metal-oxide semiconductor class-D SigmaDelta amplifier stage. The class-D amplifier is formed by a differential H-bridge driven by a single bit, pulse-density-modulated SigmaDelta bitstream at a 1.2-MHz clock rate. The fabricated MEMS loudspeaker generates more than 0.8-mum displacement, equivalent to 106-dB sound pressure level (SPL), with 0.13-mW power consumption. Driven by the SigmaDelta class-D amplifier, the MEMS loudspeaker achieves measured 65-dB total harmonic distortion (THD) with a measurement uncertainty of less than 10%. Energy-efficient and cost-effective advanced hearing aids would benefit from further miniaturization via MEMS technology. The results from this study appear very promising for developing a compact, mass-producible, low-power loudspeaker with sufficient sound generation for hearing-aid applications.

  18. Stable flexure mounting of a MEMS deformable mirror for the GPI Planet Imager

    NASA Astrophysics Data System (ADS)

    Hill, Alexis; Erickson, Darren; Fitzsimmons, Joeleff; Bierden, Paul; Cornelissen, Steven; Palmer, Dave

    2008-07-01

    Small deformable mirrors (DMs) produced using microelectromechanical systems (MEMS) techniques have been used in thermally stable, bench-top laboratory environments. With advances in MEMS DM technology, a variety of field applications are becoming more common, such as the Gemini Planet Imager's (GPI) adaptive optics system. Instruments at the Gemini Observatory operate in conditions where fluctuating ambient temperature, varying gravity orientations and humidity and dust can have a significant affect on DM performance. As such, it is crucial that the mechanical design of the MEMS DM be tailored to the environment. GPI's approach has been to mount the MEMS DM using high performance optical mounting techniques rather than a typical laboratory set-up. This paper discusses the design of the opto-mechanical mounting scheme for a 4096 actuator MEMS DM, developed by Boston Micromachines Corporation for use in the GPI adaptive optics system. Flexures have been incorporated into the DM mount to reduce deformations on the optical surface due to thermal fluctuations. These flexures have also been sized to maintain alignment under varying gravity vector orientations. Finally, a system for environmentally sealing the mirror has been designed to prevent degradation due to humidity effects. A plan for testing the mechanical mount to ensure that it meets GPI's performance and environmental requirements is also presented.

  19. Implementation and analysis of an innovative digital charge amplifier for hysteresis reduction in piezoelectric stack actuators

    SciTech Connect

    Bazghaleh, Mohsen Grainger, Steven; Cazzolato, Ben; Lu, Tien-Fu; Oskouei, Reza

    2014-04-15

    Smart actuators are the key components in a variety of nanopositioning applications, such as scanning probe microscopes and atomic force microscopes. Piezoelectric actuators are the most common smart actuators due to their high resolution, low power consumption, and wide operating frequency but they suffer hysteresis which affects linearity. In this paper, an innovative digital charge amplifier is presented to reduce hysteresis in piezoelectric stack actuators. Compared to traditional analog charge drives, experimental results show that the piezoelectric stack actuator driven by the digital charge amplifier has less hysteresis. It is also shown that the voltage drop of the digital charge amplifier is significantly less than the voltage drop of conventional analog charge amplifiers.

  20. Microelectromechanical systems integrating molecular spin crossover actuators

    NASA Astrophysics Data System (ADS)

    Manrique-Juarez, Maria D.; Rat, Sylvain; Mathieu, Fabrice; Saya, Daisuke; Séguy, Isabelle; Leïchlé, Thierry; Nicu, Liviu; Salmon, Lionel; Molnár, Gábor; Bousseksou, Azzedine

    2016-08-01

    Silicon MEMS cantilevers coated with a 200 nm thin layer of the molecular spin crossover complex [Fe(H2B(pz)2)2(phen)] (H2B(pz)2 = dihydrobis(pyrazolyl)borate and phen = 1,10-phenantroline) were actuated using an external magnetic field and their resonance frequency was tracked by means of integrated piezoresistive detection. The light-induced spin-state switching of the molecules from the ground low spin to the metastable high spin state at 10 K led to a well-reproducible shift of the cantilever's resonance frequency (Δfr = -0.52 Hz). Control experiments at different temperatures using coated as well as uncoated devices along with simple calculations support the assignment of this effect to the spin transition. This latter translates into changes in mechanical behavior of the cantilever due to the strong spin-state/lattice coupling. A guideline for the optimization of device parameters is proposed so as to efficiently harness molecular scale movements for large-scale mechanical work, thus paving the road for nanoelectromechanical systems (NEMS) actuators based on molecular materials.

  1. Magnetically Actuated Seal

    NASA Technical Reports Server (NTRS)

    Pinera, Alex

    2013-01-01

    This invention is a magnetically actuated seal in which either a single electromagnet, or multiple electromagnets, are used to control the seal's position. This system can either be an open/ close type of system or an actively controlled system.

  2. Rotary Series Elastic Actuator

    NASA Technical Reports Server (NTRS)

    Ihrke, Chris A. (Inventor); Mehling, Joshua S. (Inventor); Parsons, Adam H. (Inventor); Griffith, Bryan Kristian (Inventor); Radford, Nicolaus A. (Inventor); Permenter, Frank Noble (Inventor); Davis, Donald R. (Inventor); Ambrose, Robert O. (Inventor); Junkin, Lucien Q. (Inventor)

    2013-01-01

    A rotary actuator assembly is provided for actuation of an upper arm assembly for a dexterous humanoid robot. The upper arm assembly for the humanoid robot includes a plurality of arm support frames each defining an axis. A plurality of rotary actuator assemblies are each mounted to one of the plurality of arm support frames about the respective axes. Each rotary actuator assembly includes a motor mounted about the respective axis, a gear drive rotatably connected to the motor, and a torsion spring. The torsion spring has a spring input that is rotatably connected to an output of the gear drive and a spring output that is connected to an output for the joint.

  3. Rotary series elastic actuator

    NASA Technical Reports Server (NTRS)

    Ihrke, Chris A. (Inventor); Mehling, Joshua S. (Inventor); Parsons, Adam H. (Inventor); Griffith, Bryan Kristian (Inventor); Radford, Nicolaus A. (Inventor); Permenter, Frank Noble (Inventor); Davis, Donald R. (Inventor); Ambrose, Robert O. (Inventor); Junkin, Lucien Q. (Inventor)

    2012-01-01

    A rotary actuator assembly is provided for actuation of an upper arm assembly for a dexterous humanoid robot. The upper arm assembly for the humanoid robot includes a plurality of arm support frames each defining an axis. A plurality of rotary actuator assemblies are each mounted to one of the plurality of arm support frames about the respective axes. Each rotary actuator assembly includes a motor mounted about the respective axis, a gear drive rotatably connected to the motor, and a torsion spring. The torsion spring has a spring input that is rotatably connected to an output of the gear drive and a spring output that is connected to an output for the joint.

  4. Linear Proof Mass Actuator

    NASA Technical Reports Server (NTRS)

    Holloway, Sidney E., III

    1994-01-01

    This paper describes the mechanical design, analysis, fabrication, testing, and lessons learned by developing a uniquely designed spaceflight-like actuator. The linear proof mass actuator (LPMA) was designed to attach to both a large space structure and a ground test model without modification. Previous designs lacked the power to perform in a terrestrial environment while other designs failed to produce the desired accelerations or frequency range for spaceflight applications. Thus, the design for a unique actuator was conceived and developed at NASA Langley Research Center. The basic design consists of four large mechanical parts (mass, upper housing, lower housing, and center support) and numerous smaller supporting components including an accelerometer, encoder, and four drive motors. Fabrication personnel were included early in the design phase of the LPMA as part of an integrated manufacturing process to alleviate potential difficulties in machining an already challenging design. Operating testing of the LPMA demonstrated that the actuator is capable of various types of load functions.

  5. Linear Proof Mass Actuator

    NASA Technical Reports Server (NTRS)

    Holloway, S. E., III

    1995-01-01

    This paper describes the mechanical design, analysis, fabrication, testing, and lessons learned by developing a uniquely designed spaceflight-like actuator. The Linear Proof Mass Actuator (LPMA) was designed to attach to both a large space structure and a ground test model without modification. Previous designs lacked the power to perform in a terrestrial environment while other designs failed to produce the desired accelerations or frequency range for spaceflight applications. Thus, the design for a unique actuator was conceived and developed at NASA Langley Research Center. The basic design consists of four large mechanical parts (Mass, Upper Housing, Lower Housing, and Center Support) and numerous smaller supporting components including an accelerometer, encoder, and four drive motors. Fabrication personnel were included early in the design phase of the LPMA as part of an integrated manufacturing process to alleviate potential difficulties in machining an already challenging design. Operational testing of the LPMA demonstrated that the actuator is capable of various types of load functions.

  6. Muscle Motion Solenoid Actuator

    NASA Astrophysics Data System (ADS)

    Obata, Shuji

    It is one of our dreams to mechanically recover the lost body for damaged humans. Realistic humanoid robots composed of such machines require muscle motion actuators controlled by all pulling actions. Particularly, antagonistic pairs of bi-articular muscles are very important in animal's motions. A system of actuators is proposed using the electromagnetic force of the solenoids with the abilities of the stroke length over 10 cm and the strength about 20 N, which are needed to move the real human arm. The devised actuators are based on developments of recent modern electro-magnetic materials, where old time materials can not give such possibility. Composite actuators are controlled by a high ability computer and software making genuine motions.

  7. Tendon Driven Finger Actuation System

    NASA Technical Reports Server (NTRS)

    Ihrke, Chris A. (Inventor); Reich, David M. (Inventor); Bridgwater, Lyndon (Inventor); Linn, Douglas Martin (Inventor); Askew, Scott R. (Inventor); Diftler, Myron A. (Inventor); Platt, Robert (Inventor); Hargrave, Brian (Inventor); Valvo, Michael C. (Inventor); Abdallah, Muhammad E. (Inventor); Permenter, Frank Noble (Inventor); Mehling, Joshua S. (Inventor)

    2013-01-01

    A humanoid robot includes a robotic hand having at least one finger. An actuation system for the robotic finger includes an actuator assembly which is supported by the robot and is spaced apart from the finger. A tendon extends from the actuator assembly to the at least one finger and ends in a tendon terminator. The actuator assembly is operable to actuate the tendon to move the tendon terminator and, thus, the finger.

  8. Inertial Linear Actuators

    NASA Technical Reports Server (NTRS)

    Laughlin, Darren

    1995-01-01

    Inertial linear actuators developed to suppress residual accelerations of nominally stationary or steadily moving platforms. Function like long-stroke version of voice coil in conventional loudspeaker, with superimposed linear variable-differential transformer. Basic concept also applicable to suppression of vibrations of terrestrial platforms. For example, laboratory table equipped with such actuators plus suitable vibration sensors and control circuits made to vibrate much less in presence of seismic, vehicular, and other environmental vibrational disturbances.

  9. Combustion powered linear actuator

    DOEpatents

    Fischer, Gary J.

    2007-09-04

    The present invention provides robotic vehicles having wheeled and hopping mobilities that are capable of traversing (e.g. by hopping over) obstacles that are large in size relative to the robot and, are capable of operation in unpredictable terrain over long range. The present invention further provides combustion powered linear actuators, which can include latching mechanisms to facilitate pressurized fueling of the actuators, as can be used to provide wheeled vehicles with a hopping mobility.

  10. Laser Initiated Actuator study

    SciTech Connect

    Watson, B.

    1991-06-27

    The program task was to design and study a laser initiated actuator. The design of the actuator is described, it being comprised of the fiber and body subassemblies. The energy source for all experiments was a Spectra Diode 2200-H2 laser diode. The diode is directly coupled to a 100 micron core, 0.3 numerical aperture fiber optic terminated with an SMA connector. The successful testing results are described and recommendations are made.

  11. An electrically actuated molecular toggle switch

    NASA Astrophysics Data System (ADS)

    Gerhard, Lukas; Edelmann, Kevin; Homberg, Jan; Valášek, Michal; Bahoosh, Safa G.; Lukas, Maya; Pauly, Fabian; Mayor, Marcel; Wulfhekel, Wulf

    2017-03-01

    Molecular electronics is considered a promising approach for future nanoelectronic devices. In order that molecular junctions can be used as electrical switches or even memory devices, they need to be actuated between two distinct conductance states in a controlled and reproducible manner by external stimuli. Here we present a tripodal platform with a cantilever arm and a nitrile group at its end that is lifted from the surface. The formation of a coordinative bond between the nitrile nitrogen and the gold tip of a scanning tunnelling microscope can be controlled by both electrical and mechanical means, and leads to a hysteretic switching of the conductance of the junction by more than two orders of magnitude. This toggle switch can be actuated with high reproducibility so that the forces involved in the mechanical deformation of the molecular cantilever can be determined precisely with scanning tunnelling microscopy.

  12. An electrically actuated molecular toggle switch.

    PubMed

    Gerhard, Lukas; Edelmann, Kevin; Homberg, Jan; Valášek, Michal; Bahoosh, Safa G; Lukas, Maya; Pauly, Fabian; Mayor, Marcel; Wulfhekel, Wulf

    2017-03-09

    Molecular electronics is considered a promising approach for future nanoelectronic devices. In order that molecular junctions can be used as electrical switches or even memory devices, they need to be actuated between two distinct conductance states in a controlled and reproducible manner by external stimuli. Here we present a tripodal platform with a cantilever arm and a nitrile group at its end that is lifted from the surface. The formation of a coordinative bond between the nitrile nitrogen and the gold tip of a scanning tunnelling microscope can be controlled by both electrical and mechanical means, and leads to a hysteretic switching of the conductance of the junction by more than two orders of magnitude. This toggle switch can be actuated with high reproducibility so that the forces involved in the mechanical deformation of the molecular cantilever can be determined precisely with scanning tunnelling microscopy.

  13. An electrically actuated molecular toggle switch

    PubMed Central

    Gerhard, Lukas; Edelmann, Kevin; Homberg, Jan; Valášek, Michal; Bahoosh, Safa G.; Lukas, Maya; Pauly, Fabian; Mayor, Marcel; Wulfhekel, Wulf

    2017-01-01

    Molecular electronics is considered a promising approach for future nanoelectronic devices. In order that molecular junctions can be used as electrical switches or even memory devices, they need to be actuated between two distinct conductance states in a controlled and reproducible manner by external stimuli. Here we present a tripodal platform with a cantilever arm and a nitrile group at its end that is lifted from the surface. The formation of a coordinative bond between the nitrile nitrogen and the gold tip of a scanning tunnelling microscope can be controlled by both electrical and mechanical means, and leads to a hysteretic switching of the conductance of the junction by more than two orders of magnitude. This toggle switch can be actuated with high reproducibility so that the forces involved in the mechanical deformation of the molecular cantilever can be determined precisely with scanning tunnelling microscopy. PMID:28276442

  14. Hybrid electromechanical actuator and actuation system

    NASA Technical Reports Server (NTRS)

    Su, Ji (Inventor); Xu, Tian-Bing (Inventor)

    2008-01-01

    A hybrid electromechanical actuator has two different types of electromechanical elements, one that expands in a transverse direction when electric power is applied thereto and one that contracts in a transverse direction when electric power is applied thereto. The two electromechanical elements are (i) disposed in relation to one another such that the transverse directions thereof are parallel to one another, and (ii) mechanically coupled to one another at least at two opposing edges thereof. Electric power is applied simultaneously to the elements.

  15. Thermally actuated resonant silicon crystal nanobalances

    NASA Astrophysics Data System (ADS)

    Hajjam, Arash

    As the potential emerging technology for next generation integrated resonant sensors and frequency references as well as electronic filters, micro-electro-mechanical resonators have attracted a lot of attention over the past decade. As a result, a wide variety of high frequency micro/nanoscale electromechanical resonators have recently been presented. MEMS resonators, as low-cost highly integrated and ultra-sensitive mass sensors, can potentially provide new opportunities and unprecedented capabilities in the area of mass sensing. Such devices can provide orders of magnitude higher mass sensitivity and resolution compared to Film Bulk Acoustic resonators (FBAR) or the conventional quartz and Surface Acoustic Wave (SAW) resonators due to their much smaller sizes and can be batch-fabricated and utilized in highly integrated large arrays at a very low cost. In this research, comprehensive experimental studies on the performance and durability of thermally actuated micromechanical resonant sensors with frequencies up to tens of MHz have been performed. The suitability and robustness of the devices have been demonstrated for mass sensing applications related to air-borne particles and organic gases. In addition, due to the internal thermo-electro-mechanical interactions, the active resonators can turn some of the consumed electronic power back into the mechanical structure and compensate for the mechanical losses. Therefore, such resonators can provide self-sustained-oscillation without the need for any electronic circuitry. This unique property has been deployed to demonstrate a prototype self-sustained sensor for air-borne particle monitoring. I have managed to overcome one of the obstacles for MEMS resonators, which is their relatively poor temperature stability. This is a major drawback when compared with the conventional quartz crystals. A significant decrease of the large negative TCF for the resonators has been attained by doping the devices with a high

  16. MEMS Reliability Assurance Activities at JPL

    NASA Technical Reports Server (NTRS)

    Kayali, S.; Lawton, R.; Stark, B.

    2000-01-01

    An overview of Microelectromechanical Systems (MEMS) reliability assurance and qualification activities at JPL is presented along with the a discussion of characterization of MEMS structures implemented on single crystal silicon, polycrystalline silicon, CMOS, and LIGA processes. Additionally, common failure modes and mechanisms affecting MEMS structures, including radiation effects, are discussed. Common reliability and qualification practices contained in the MEMS Reliability Assurance Guideline are also presented.

  17. Backed Bending Actuator

    NASA Technical Reports Server (NTRS)

    Costen, Robert C.; Su, Ji

    2004-01-01

    Bending actuators of a proposed type would partly resemble ordinary bending actuators, but would include simple additional components that would render them capable of exerting large forces at small displacements. Like an ordinary bending actuator, an actuator according to the proposal would include a thin rectangular strip that would comprise two bonded layers (possibly made of electroactive polymers with surface electrodes) and would be clamped at one end in the manner of a cantilever beam. Unlike an ordinary bending actuator, the proposed device would include a rigid flat backplate that would support part of the bending strip against backward displacement; because of this feature, the proposed device is called a backed bending actuator. When an ordinary bending actuator is inactive, the strip typically lies flat, the tip displacement is zero, and the force exerted by the tip is zero. During activation, the tip exerts a transverse force and undergoes a bending displacement that results from the expansion or contraction of one or more of the bonded layers. The tip force of an ordinary bending actuator is inversely proportional to its length; hence, a long actuator tends to be weak. The figure depicts an ordinary bending actuator and the corresponding backed bending actuator. The bending, the tip displacement (d(sub t)), and the tip force (F) exerted by the ordinary bending actuator are well approximated by the conventional equations for the loading and deflection of a cantilever beam subject to a bending moment which, in this case, is applied by the differential expansion or contraction of the bonded layers. The bending, displacement, and tip force of the backed bending actuator are calculated similarly, except that it is necessary to account for the fact that the force F(sub b) that resists the displacement of the tip could be sufficient to push part of the strip against the backplate; in such a condition, the cantilever beam would be effectively shortened

  18. Electrothermally tunable MEMS filters

    NASA Astrophysics Data System (ADS)

    Prasad, A. V. S. S.; K. P., Venkatesh; Bhat, Navakanta; Pratap, Rudra

    2014-03-01

    MEMS resonators have potential application in the area of frequency selective devices (e.g., gyroscopes, mass sensors, etc.). In this paper, design of electro thermally tunable resonators is presented. SOIMUMPs process is used to fabricate resonators with springs (beams) and a central mass. When voltage is applied, due to joule heating, temperature of the conducting beams goes up. This results in increase of electrical resistance due to mobility degradation. Due to increase in the temperature, springs start softening and therefore the fundamental frequency decreases. So for a given structure, one can modify the original fundamental frequency by changing the applied voltage. Coupled thermal effects result in non-uniform heating. It is observed from measurements and simulations that some parts of the beam become very hot and therefore soften more. Consequently, at higher voltages, the structure (equivalent to a single resonator) behaves like coupled resonators and exhibits peak splitting. In this mode, the given resonator can be used as a band rejection filter. This process is reversible and repeatable. For the designed structure, it is experimentally shown that by varying the voltage from 1 to 16V, the resonant frequency could be changed by 28%.

  19. Status of the MEMS industry

    NASA Astrophysics Data System (ADS)

    Eloy, J. C.; Mounier, E.

    2005-01-01

    This paper analyzes the current status of the MEMS industry. After the 2000 and 2001 years with high expectation for MEMS devices for the optical telecommunications, followed by the 2002/2003 downturn leading to the closing of more than 100 MEMS fabs worldwide, this industry has come back to a more normal way of working. There are still 10 to 15 companies worldwide which will certainly end their business within 16 months but the overall activity is more stabilized. MEMS markets will reach 5.4 B$ in 2005, with growth rates which are very different if one compares different market segments. The top 30 MEMS manufacturers have a market share of more than 60% of the total market; the remaining 40% is shared by more than 200 companies. Most of the smallest companies have 2 business models: either small companies developing specific processes, with R&D and small volume production, or systems manufacturers with integrated fabs. These fabs are loaded at less than 40% but considered as an enabler for the system business. Many changes are currently appearing: as contract manufacturers become more credible, system manufacturers are looking to externalise their fabrication processes; fabless companies are also finding companies able to produce at the right cost and quality. The fabless business model is now well structured.

  20. Design of a smart bidirectional actuator for space operation

    NASA Astrophysics Data System (ADS)

    Saggin, Bortolino; Scaccabarozzi, Diego; Tarbini, Marco; Magni, Marianna; Biffi, Carlo Alberto; Tuissi, Ausonio

    2017-03-01

    A common need for space borne instruments, satellites and planetary exploration payloads is the usage of compact, light and low power actuators. In the recent years, this need has been partially solved by the development of customized solutions with an increasing usage of smart materials. A linear bidirectional actuator based on shape memory alloy technology is presented in this work. The device has been conceived to lock the double-pendulum scanning mechanism of a miniaturized Fourier transform spectrometer for planetary observation. The mechanism class is that of pin pullers, with the pin locking the movable components of the spectrometer during launch and landing phases. The proposed mechanism, differently from available off-the-shelf devices, allows multiple actuations without the need of manual resetting. Moreover, the device requires to be powered only to change its status. An appealing feature of the adopted concept is that the actuation is intrinsically shock-less, a key requirement for deployment of devices sensitive to mechanical vibration and shocks. All these characteristics, in addition to the design flexibility of the proposed concept in terms of achievable forces and strokes, make the designed actuator promising for many different applications, from space to ground. The designed bidirectional actuator provides 0.6 mm stroke and a 50 N preload but it represents just an example of implementation for the proposed concept. Structural design of the functional elastic components and SMA alloy characterization have guided the actuator development. A mockup of the actuator has been manufactured and the predicted performances preliminary validated.

  1. Electrostatic MEMS devices with high reliability

    SciTech Connect

    Goldsmith, Charles L; Auciello, Orlando H; Sumant, Anirudha V; Mancini, Derrick C; Gudeman, Chris; Sampath, Suresh; Carlilse, John A; Carpick, Robert W; Hwang, James

    2015-02-24

    The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.

  2. Integration of IC Foundries and MEMS Fabrication

    DTIC Science & Technology

    2009-03-01

    Peterson, 1982) Polysilicon surface micromachining LIGA (Karlsruhe, 1986) Silicon accelerometers commercialized Micromotors MOSIS CMOS MEMS (1991) MUMPS...1992) DRIE (1995) ’80s Surface Micromachining ’90s MEMS Foundries Bulk Si Micromachining ASTM MEMS Test Structures (1998) Future MOSIS (1986) ASIMPS

  3. MEMS Reliability Assurance Guidelines for Space Applications

    NASA Technical Reports Server (NTRS)

    Stark, Brian (Editor)

    1999-01-01

    This guide is a reference for understanding the various aspects of microelectromechanical systems, or MEMS, with an emphasis on device reliability. Material properties, failure mechanisms, processing techniques, device structures, and packaging techniques common to MEMS are addressed in detail. Design and qualification methodologies provide the reader with the means to develop suitable qualification plans for the insertion of MEMS into the space environment.

  4. Integration, electrical, and electromechanical properties of PZT and PMN-PT thin films for MEMS applications

    NASA Astrophysics Data System (ADS)

    Kuegeler, Carsten; Hoffmann, Marcus; Boettger, Ulrich; Waser, Rainer

    2002-07-01

    Piezoelectric and electrostrictive thin films are potential candidates for actuator functions in micro-electro-mechanical systems (MEMS) offering displacements and forces which outperform standard solutions, e.g. in micro mirrors and micro relays. Within this context the paper reports on the preparation and the integration processes of chemical solution deposited (CSD) PZT and PMN-PT thin films in combination with silicon bulk micro machining technique. The operativeness of the processes is demonstrated by the development of an integrated micro actuator for a micro switch application. Furthermore, the work deals also with the characterization of the integrated materials. For fabrication control and electrical characterizations microscopy, SEM, hysteresis- and CV-, and degradation measurements were performed. Laser interferometry and resonance frequency measurements were used to characterize the electromechanical performance of both materials in comparison to the behavior of the developed micro actuator.

  5. Characterization of electrothermal actuators and arrays fabricated in a four-level, planarized surface-micromachined polycrystalline silicon process

    SciTech Connect

    Comtois, J.H.; Michalicek, M.A.; Barron, C.C.

    1997-06-01

    This paper presents the results of tests performed on a variety of electrothermal microactuators and arrays of these actuators recently fabricated in the four-level planarized polycrystalline silicon (polysilicon) SUMMiT process at the U.S. Department of Energy`s Sandia National Laboratories. These results are intended to aid designers of thermally actuated mechanisms, and will apply to similar actuators made in other polysilicon MEMS processes. The measurements include force and deflection versus input power, maximum operating frequency, effects of long term operation, and ideal actuator and array geometries for different design criteria. A typical application in a stepper motor is shown to illustrate the utility of these actuators and arrays.

  6. Non-collinear valve actuator

    NASA Technical Reports Server (NTRS)

    Richard, James A. (Inventor)

    2012-01-01

    A non-collinear valve actuator includes a primary actuating system and a return spring system with each applying forces to a linkage system in order to regulate the flow of a quarter-turn valve. The primary actuating system and return spring system are positioned non-collinearly, which simply means the primary actuating system and return spring system are not in line with each other. By positioning the primary actuating system and return spring system in this manner, the primary actuating system can undergo a larger stroke while the return spring system experiences significantly less displacement. This allows the length of the return spring to be reduced due to the minimization of displacement thereby reducing the weight of the return spring system. By allowing the primary actuating system to undergo longer strokes, the weight of the primary actuating system may also be reduced. Accordingly, the weight of the non-collinear valve actuator is reduced.

  7. Three-dimensional polymer MEMS with functionalized carbon nanotubes by microstereolithography

    NASA Astrophysics Data System (ADS)

    Varadan, Vijay K.; Xie, Jining

    2002-11-01

    Microfabrication techniques such as bulk micromachining and surface micromachining currently employed to conceive MEMS are largely derived from the standard IC and microelectronics technology. Even though many MEMS devices with integrated electronics have been achieved by using the traditional micromachining techniques, some limitations have nevertheless to be underlined: 1) these techniques are very expensive and need specific installations as well as a cleanroom environment, 2) the materials that can be used up to now are restricted to silicon and metals, 3) the manufacture of 3D parts having curved surfaces or an important numberof layers is not possible. Moreover, for some biological applications, the materials used for sensors must be compatible with human body and the actuators need to have high strain and displacement which the current silicon based MEMS do not provide. It is thus natural for the researchers to 'look' for alternative methods such as Microstereolithography (MSL) to make 3D sensors and actuators using polymeric based materials. For MSL techniques to be successful as their silicon counterparts, one has to come up with multifunctional polyers with electrical properties comparable to silicon. These multifunctional polymers should not only have a high sensing capability but also a high strain and actuation performance. A novel UV-curable polymer uniformly bonded with functionalized nanotubes was synthesized via a modified three-step in-sity polumerization. Purified multi-walled nanotubes, gained from the microwave chemical vapor deposition method, were functionalized by oxidation. The UV curable polymer was prepared from toluene diisocyanate (TDI), functionalized nanotubes, and 2-hydroxyethyl methacrylate (HEMA). The chemical bonds between -NCO groups of TDI and -OH, -COOH groups of functionalized nanotubes help for conceiving polymeric based MEMS devices. A cost effective fabrication techniques was presented using Micro Stereo Lithography and an

  8. MEMS Rate Sensors for Space

    NASA Technical Reports Server (NTRS)

    Gambino, Joel

    2000-01-01

    Micromachined Electro Mechanical System (MEMS) Rate Sensors are an enabling technology for Nanosatellites. The recent award of a Nanosatellite program to the Goddard Space Flight Center (GSFC) underscores the urgency of the development of these systems for space use. The Guidance Navigation and Control Center (GNCC) at the GSFC is involved in several efforts to develop this technology. The GNCC seeks to improve the performance of these sensors and develop flight ready systems for spacecraft use by partnering with industry leaders in MEMS Rate Sensor development. This paper introduces Microgyros and discusses the efforts in progress at the GNCC to improve the performance of these units and develop MEMS Rate Sensors for space use.

  9. Mechanical and electromechanical properties of graphene and their potential application in MEMS

    NASA Astrophysics Data System (ADS)

    Khan, Zulfiqar H.; Kermany, Atieh R.; Öchsner, Andreas; Iacopi, Francesca

    2017-02-01

    Graphene-based micro-electromechanical systems (MEMS) are very promising candidates for next generation miniaturized, lightweight, and ultra-sensitive devices. In this review, we review the progress to date of the assessment of the mechanical, electromechanical, and thermomechanical properties of graphene for application in graphene-based MEMS. Graphene possesses a plethora of outstanding properties—such as a 1 TPa Young’s modulus, exceptionally high 2D failure strength that stems from its sp2 hybridization, and strong sigma bonding between carbon atoms. Such exceptional mechanical properties can enable, for example, graphene-based sound sources capable of generating sound beyond the audible range. The recently engineered piezoelectric properties of atomic force microscope tip-pressed graphene membranes or supported graphene on SiO2 substrates, have paved the way in fabricating graphene-based nano-generators and actuators. On the other hand, graphene’s piezoresistive properties have enabled miniaturized pressure and strain sensors. 2D graphene nano-mechanical resonators can potentially measure ultralow forces, charges and potentially detect single atomic masses. The exceptional tribology of graphene can play a significant role in achieving superlubricity. In addition, the highest reported thermal conductivity of graphene is amenable for use in chips and providing better performing MEMS, as heat is efficiently dissipated. On top of that, graphene membranes could be nano-perforated to realize specialized applications like DNA translocation and desalination. Finally, to ensure stability and reliability of the graphene-based MEMS, adhesion is an important mechanical property that should be considered. In general, graphene could be used as a structural material in resonators, sensors, actuators and nano-generators with better performance and sensitivity than conventional MEMS.

  10. Digital Actuator Technology

    SciTech Connect

    Ken Thomas; Ted Quinn; Jerry Mauck; Richard Bockhorst

    2014-09-01

    There are significant developments underway in new types of actuators for power plant active components. Many of these make use of digital technology to provide a wide array of benefits in performance of the actuators and in reduced burden to maintain them. These new product offerings have gained considerable acceptance in use in process plants. In addition, they have been used in conventional power generation very successfully. This technology has been proven to deliver the benefits promised and substantiate the claims of improved performance. The nuclear industry has been reluctant to incorporate digital actuator technology into nuclear plant designs due to concerns due to a number of concerns. These could be summarized as cost, regulatory uncertainty, and a certain comfort factor with legacy analog technology. The replacement opportunity for these types of components represents a decision point for whether to invest in more modern technology that would provide superior operational and maintenance benefits. Yet, the application of digital technology has been problematic for the nuclear industry, due to qualification and regulatory issues. With some notable exceptions, the result has been a continuing reluctance to undertake the risks and uncertainties of implementing digital actuator technology when replacement opportunities present themselves. Rather, utilities would typically prefer to accept the performance limitations of the legacy analog actuator technologies to avoid impacts to project costs and schedules. The purpose of this report is to demonstrate that the benefits of digital actuator technology can be significant in terms of plant performance and that it is worthwhile to address the barriers currently holding back the widespread development and use of this technology. It addresses two important objectives in pursuit of the beneficial use of digital actuator technology for nuclear power plants: 1. To demonstrate the benefits of digital actuator

  11. Zipping dielectric elastomer actuators: characterization, design and modeling

    NASA Astrophysics Data System (ADS)

    Maffli, L.; Rosset, S.; Shea, H. R.

    2013-10-01

    We report on miniature dielectric elastomer actuators (DEAs) operating in zipping mode with an analytical model that predicts their behavior. Electrostatic zipping is a well-known mechanism in silicon MEMS to obtain large deformations and forces at lower voltages than for parallel plate electrostatic actuation. We extend this concept to DEAs, which allows us to obtain much larger out-of-plane displacements compared to silicon thanks to the softness of the elastomer membrane. We study experimentally the effect of sidewall angles and elastomer prestretch on 2.3 mm diameter actuators with PDMS membranes. With 15° and 22.5° sidewall angles, the devices zip in a bistable manner down 300 μm to the bottom of the chambers. The highly tunable bistable behavior is controllable by both chamber geometry and membrane parameters. Other specific characteristics of zipping DEAs include well-controlled deflected shape, tunable displacement versus voltage characteristics to virtually any shape, including multi-stable modes, sealing of embedded holes or channels for valving action and the reduction of the operating voltage. These properties make zipping DEAs an excellent candidate for applications such as integrated microfluidics actuators or Braille displays.

  12. Electro thermal analysis of rotary type micro thermal actuator

    NASA Astrophysics Data System (ADS)

    Anwar, M. Arefin; Packirisamy, Muthukumaran; Ahmed, A. K. Waiz

    2005-09-01

    In micro domain, thermal actuators are favored because it provides higher force and deflection than others. This paper presents a new type of micro thermal actuator that provides rotary motion of the circular disc shaped cold arm, which can be used in various optical applications, such as, switching, attenuation, diffraction, etc. The device has been fabricated in MUMPS technology. In this new design, the hot arms are arranged with the cold disc in such a way that thermal expansion of the hot arms due to Joule heating, will make the cold disc to rotate and the rotation is unidirectional on loading. The dominant heat transfer modes in the operating temperature zone are through the anchor and the air between the structure and the substrate because of the very low gap provided by MUMPS. A mathematical model was used for predicting steady state temperature profile along the actuator length and rotational behavior of the cold disc under different applied voltages. A 3-D coupled field finite element analysis (FEM) for the device is also presented. A FEM analysis was done by defining an air volume around the structure and substrate below the structure. Results obtained from the mathematical model, was compared with that of the finite element analysis. The presented results confirm the applicability of this novel rotary type thermal actuator for many optical MEMS applications.

  13. Folded dielectric elastomer actuators

    NASA Astrophysics Data System (ADS)

    Carpi, Federico; Salaris, Claudio; DeRossi, Danilo

    2007-04-01

    Polymer-based linear actuators with contractile ability are currently demanded for several types of applications. Within the class of dielectric elastomer actuators, two basic configurations are available today for such a purpose: the multi-layer stack and the helical structure. The first consists of several layers of elementary planar actuators stacked in series mechanically and parallel electrically. The second configuration relies on a couple of helical compliant electrodes alternated with a couple of helical dielectrics. The fabrication of both these configurations presents some specific drawbacks today, arising from the peculiarity of each structure. Accordingly, the availability of simpler solutions may boost the short-term use of contractile actuators in practical applications. For this purpose, a new configuration is here described. It consists of a monolithic structure made of an electroded sheet, which is folded up and compacted. The resulting device is functionally equivalent to a multi-layer stack with interdigitated electrodes. However, with respect to a stack the new configuration is advantageously not discontinuous and can be manufactured in one single phase, avoiding layer-by-layer multi-step procedures. The development and preliminary testing of prototype samples of this new actuator made of a silicone elastomer are presented here.

  14. "Mem's the Word": Examining the Writing of Mem Fox.

    ERIC Educational Resources Information Center

    Gilles, Carol

    2000-01-01

    Focuses on the work of Mem Fox. Explores Fox's life in order to better understand her work; examines books she has written for teachers and for parents; and reviews her children's books, emphasizing children's and teachers comments. Looks at best-loved books, bedtime books, predictable books for early readers, books that play with language, and…

  15. MEMS micromirrors for optical switching in multichannel spectrophotometers

    NASA Astrophysics Data System (ADS)

    Tuantranont, Adisorn; Lomas, Tanom; Bright, Victor M.

    2004-04-01

    This paper reports for the first time that a novel MEMS-based micromirror switch has successfully demonstrated for optical switching in a multi-channel fiber optics spectrophotometer system. The conventional optomechanical fiber optic switches for multi-channel spectrophotometers available in market are bulky, slow, low numbers of channels and expensive. Our foundry MEMS-based micromirror switch designed for integrating with commercially available spectrophotometers offers more compact devices, increased number of probing channels, higher performance and cheaper. Our MEMS-based micromirror switch is a surface micromachined mirror fabricated through MUMPs foundry. The 280 μm x 280 μm gold coated mirror is suspended by the double-gimbal structure for X and Y axis scanning. Self-assembly by solders is used to elevate the torsion mirror 30 μm over the substrate to achieve large scan angle. The solder self-assembly approach dramatically reduces the time to assembly the switch. The scan mirror is electrostatically controlled by applying voltages. The individual probing signal from each probing head is guided by fibers with collimated lenses and incidents on the center of the mirror. The operating scan angle is in the range of 3.5 degrees with driving voltage of 0-100 V. The fastest switching time of 4 millisecond (1 ms rise time and 3 ms fall time) is measured corresponding to the maximum speed of the mirror of 0.25 kHz when the mirror is scanning at +/- 1.5 degrees. The micromirror switch is packaged with a multi-mode fiber bundle using active alignment technique. A centered fiber is the output fiber that is connected to spectrophotometer. Maximum insertion loss of 5 dB has been obtained. The accuracy of measured spectral data is equivalent to the single channel spectrophotometer with a small degradation on probing signal due to fiber coupling.

  16. A polymer-based Fabry-Perot filter integrated with 3-D MEMS structures

    NASA Astrophysics Data System (ADS)

    Zhang, Ping (Cerina); Le, Kevin; Malalur-Nagaraja-Rao, Smitha; Hsu, Lun-Chen; Chiao, J.-C.

    2006-01-01

    Polymers have been considered as one of the most versatile materials in making optical devices for communication and sensor applications. They provide good optical transparency to form filters, lenses and many optical components with ease of fabrication. They are scalable and compatible in dimensions with requirements in optics and can be fabricated on inorganic substrates, such as silicon and quartz. Recent polymer synthesis also made great progresses on conductive and nonlinear polymers, opening opportunities for new applications. In this paper, we discussed hybrid-material integration of polymers on silicon-based microelectromechanical system (MEMS) devices. The motivation is to combine the advantages of demonstrated silicon-based MEMS actuators and excellent optical performance of polymers. We demonstrated the idea with a polymer-based out-of-plane Fabry-Perot filter that can be self-assembled by scratch drive actuators. We utilized a fabrication foundry service, MUMPS (Multi-User MEMS Process), to demonstrate the feasibility and flexibility of integration. The polysilicon, used as the structural material for construction of 3-D framework and actuators, has high absorption in the visible and near infrared ranges. Therefore, previous efforts using a polysilicon layer as optical interfaces suffer from high losses. We applied the organic compound materials on the silicon-based framework within the optical signal propagation path to form the optical interfaces. In this paper, we have shown low losses in the optical signal processing and feasibility of building a thin-film Fabry-Perot filter. We discussed the optical filter designs, mechanical design, actuation mechanism, fabrication issues, optical measurements, and results.

  17. Advancing MEMS Technology Usage through the MUMPS (Multi-User MEMS Processes) Program

    NASA Technical Reports Server (NTRS)

    Koester, D. A.; Markus, K. W.; Dhuler, V.; Mahadevan, R.; Cowen, A.

    1995-01-01

    In order to help provide access to advanced micro-electro-mechanical systems (MEMS) technologies and lower the barriers for both industry and academia, the Microelectronic Center of North Carolina (MCNC) and ARPA have developed a program which provides users with access to both MEMS processes and advanced electronic integration techniques. The four distinct aspects of this program, the multi-user MEMS processes (MUMP's), the consolidated micro-mechanical element library, smart MEMS, and the MEMS technology network are described in this paper. MUMP's is an ARPA-supported program created to provide inexpensive access to MEMS technology in a multi-user environment. It is both a proof-of-concept and educational tool that aids in the development of MEMS in the domestic community. MUMP's technologies currently include a 3-layer poly-silicon surface micromachining process and LIGA (lithography, electroforming, and injection molding) processes that provide reasonable design flexibility within set guidelines. The consolidated micromechanical element library (CaMEL) is a library of active and passive MEMS structures that can be downloaded by the MEMS community via the internet. Smart MEMS is the development of advanced electronics integration techniques for MEMS through the application of flip chip technology. The MEMS technology network (TechNet) is a menu of standard substrates and MEMS fabrication processes that can be purchased and combined to create unique process flows. TechNet provides the MEMS community greater flexibility and enhanced technology accessibility.

  18. Hydraulically actuated artificial muscles

    NASA Astrophysics Data System (ADS)

    Meller, M. A.; Tiwari, R.; Wajcs, K. B.; Moses, C.; Reveles, I.; Garcia, E.

    2012-04-01

    Hydraulic Artificial Muscles (HAMs) consisting of a polymer tube constrained by a nylon mesh are presented in this paper. Despite the actuation mechanism being similar to its popular counterpart, which are pneumatically actuated (PAM), HAMs have not been studied in depth. HAMs offer the advantage of compliance, large force to weight ratio, low maintenance, and low cost over traditional hydraulic cylinders. Muscle characterization for isometric and isobaric tests are discussed and compared to PAMs. A model incorporating the effect of mesh angle and friction have also been developed. In addition, differential swelling of the muscle on actuation has also been included in the model. An application of lab fabricated HAMs for a meso-scale robotic system is also presented.

  19. Fault tolerant linear actuator

    DOEpatents

    Tesar, Delbert

    2004-09-14

    In varying embodiments, the fault tolerant linear actuator of the present invention is a new and improved linear actuator with fault tolerance and positional control that may incorporate velocity summing, force summing, or a combination of the two. In one embodiment, the invention offers a velocity summing arrangement with a differential gear between two prime movers driving a cage, which then drives a linear spindle screw transmission. Other embodiments feature two prime movers driving separate linear spindle screw transmissions, one internal and one external, in a totally concentric and compact integrated module.

  20. Hydraulic involute cam actuator

    DOEpatents

    Love, Lonnie J [Knoxville, TN; Lind, Randall F [Loudon, TX

    2011-11-01

    Mechanical joints are provided in which the angle between a first coupled member and a second coupled member may be varied by mechanical actuators. In some embodiments the angle may be varied around a pivot axis in one plane and in some embodiments the angle may be varied around two pivot axes in two orthogonal planes. The joints typically utilize a cam assembly having two lobes with an involute surface. Actuators are configured to push against the lobes to vary the rotation angle between the first and second coupled member.

  1. Tetherless thermobiochemically actuated microgrippers

    PubMed Central

    Leong, Timothy G.; Randall, Christina L.; Benson, Bryan R.; Bassik, Noy; Stern, George M.; Gracias, David H.

    2009-01-01

    We demonstrate mass-producible, tetherless microgrippers that can be remotely triggered by temperature and chemicals under biologically relevant conditions. The microgrippers use a self-contained actuation response, obviating the need for external tethers in operation. The grippers can be actuated en masse, even while spatially separated. We used the microgrippers to perform diverse functions, such as picking up a bead on a substrate and the removal of cells from tissue embedded at the end of a capillary (an in vitro biopsy). PMID:19139411

  2. MEMS reliability: coming of age

    NASA Astrophysics Data System (ADS)

    Douglass, Michael R.

    2008-02-01

    In today's high-volume semiconductor world, one could easily take reliability for granted. As the MOEMS/MEMS industry continues to establish itself as a viable alternative to conventional manufacturing in the macro world, reliability can be of high concern. Currently, there are several emerging market opportunities in which MOEMS/MEMS is gaining a foothold. Markets such as mobile media, consumer electronics, biomedical devices, and homeland security are all showing great interest in microfabricated products. At the same time, these markets are among the most demanding when it comes to reliability assurance. To be successful, each company developing a MOEMS/MEMS device must consider reliability on an equal footing with cost, performance and manufacturability. What can this maturing industry learn from the successful development of DLP technology, air bag accelerometers and inkjet printheads? This paper discusses some basic reliability principles which any MOEMS/MEMS device development must use. Examples from the commercially successful and highly reliable Digital Micromirror Device complement the discussion.

  3. Microwave bonding of MEMS component

    NASA Technical Reports Server (NTRS)

    Barmatz, Martin B. (Inventor); Mai, John D. (Inventor); Jackson, Henry W. (Inventor); Budraa, Nasser K. (Inventor); Pike, William T. (Inventor)

    2005-01-01

    Bonding of MEMs materials is carried out using microwave. High microwave absorbing films are placed within a microwave cavity, and excited to cause selective heating in the skin of the material. This causes heating in one place more than another. Thereby minimizing the effects of the bonding microwave energy.

  4. Integrated superhard and metallic coatings for MEMS : LDRD 57300 final report.

    SciTech Connect

    de Boer, Maarten Pieter; Maboudian, Roya

    2004-12-01

    Two major research areas pertinent to microelectromechanical systems (MEMS) materials and material surfaces were explored and developed in this 5-year PECASE LDRD project carried out by Professor Roya Maboudian and her collaborators at the University of California at Berkeley. In the first research area, polycrystalline silicon carbide (poly-SiC) was developed as a structural material for MEMS. This material is potentially interesting for MEMS because compared to polycrystalline silicon (polysilicon), the structural material in Sandia National Laboratories' SUMMiTV process, it may exhibit high wear resistance, high temperature operation and a high Young's modulus to density ratio. Each of these characteristics may extend the usefulness of MEMS in Sandia National Laboratories' applications. For example, using polycrystalline silicon, wear is an important issue in microengines, temperature degradation is of concern in thermal actuators and the characteristics of resonators can be extended with the same lithography technology. Two methods of depositing poly-SiC from a 1,3-disilabutane source at 650 C to 800 C by low-pressure chemical vapor deposition (LPCVD) were demonstrated. These include a blanket method in which the material is made entirely out of poly-SiC and a method to coat previously released and fabricated polysilicon MEMS. This deposition method is much simpler to use than previous methods such as high temperature LPCVD and atmospheric CVD. Other major processing issues that were surmounted in this LDRD with the poly-SiC film include etching, doping, and residual strain control. SiC is inert and as such is notoriously difficult to etch. Here, an HBr-based chemistry was demonstrated for the first time to make highly selective etching of SiC at high etch rates. Nitrogen was incorporated from an NH3 gas source, resulting in high conductivity films. Residual strain and strain gradient were shown to depend on deposition parameters, and can be made negative or

  5. MEMS tunable optical filter based on multi-ring resonator

    SciTech Connect

    Dessalegn, Hailu E-mail: tsrinu@ece.iisc.ernet.in; Srinivas, T. E-mail: tsrinu@ece.iisc.ernet.in

    2014-10-15

    We propose a novel MEMS tunable optical filter with a flat-top pass band based on multi-ring resonator in an electrostatically actuated microcantilever for communication application. The filter is basically structured on a microcantilever beam and built in optical integrated ring resonator which is placed in one end of the beam to gain maximum stress on the resonator. Thus, when a DC voltage is applied, the beam will bend, that induces a stress and strain in the ring, which brings a change in refractive index and perimeter of the rings leading to change in the output spectrum shift, providing the tenability as high as 0.68nm/μN and it is capable of tuning up to 1.7nm.

  6. Strain engineering of diamond silicon vacancy centers in MEMS cantilevers

    NASA Astrophysics Data System (ADS)

    Meesala, Srujan; Sohn, Young-Ik; Atikian, Haig; Holzgrafe, Jeffrey; Zhang, Mian; Burek, Michael; Loncar, Marko

    2016-05-01

    The silicon vacancy (SiV) center in diamond has recently attracted attention as a solid state quantum emitter due to its attractive optical properties. We fabricate diamond MEMS cantilevers, and use electrostatic actuation to apply controlled strain fields to single SiV centers implanted in these devices. The strain response of the four electronic transitions of the SiV at 737 nm is measured via cryogenic (4 K) photoluminescence excitation. We demonstrate over 300 GHz of tuning for the mean transition frequency between the ground and excited states, and over 100 GHz of tuning for the orbital splittings within the ground and excited states. The interaction Hamiltonian for strain fields is inferred, and large strain susceptibilities of the order 1 PHz/strain are measured. We discuss prospects to utilize our device to reduce phonon-induced decoherence in SiV spin qubits, and to exploit the large strain susceptibilities for hybrid quantum systems based on nanomechanical resonators.

  7. MEMS-based extreme adaptive optics for planet detection

    SciTech Connect

    Macintosh, B A; Graham, J R; Oppenheimer, B; Poyneer, L; Sivaramakrishnan, A; Veran, J

    2005-11-18

    The next major step in the study of extrasolar planets will be the direct detection, resolved from their parent star, of a significant sample of Jupiter-like extrasolar giant planets. Such detection will open up new parts of the extrasolar planet distribution and allow spectroscopic characterization of the planets themselves. Detecting Jovian planets at 5-50 AU scale orbiting nearby stars requires adaptive optics systems and coronagraphs an order of magnitude more powerful than those available today--the realm of ''Extreme'' adaptive optics. We present the basic requirements and design for such a system, the Gemini Planet Imager (GPI.) GPI will require a MEMS-based deformable mirror with good surface quality, 2-4 micron stroke (operated in tandem with a conventional low-order ''woofer'' mirror), and a fully-functional 48-actuator-diameter aperture.

  8. Optical performance requirements for MEMS-scanner-based microdisplays

    NASA Astrophysics Data System (ADS)

    Urey, Hakan; Wine, David W.; Osborn, Thor D.

    2000-08-01

    High-resolution and high frame rate dynamic microdisplays can be implemented by scanning a photon beam in a raster format across the viewer's retina. Microvision is developing biaxial MEMS scanners for such video display applications. This paper discusses the optical performance requirements for scanning display systems. The display resolution directly translates into a scan-angle-mirror-size product and the frame rate translates into vertical and horizontal scanner frequencies. (theta) -product and fh are both very important figures of merit for scanner performance comparison. In addition, the static and dynamic flatness of the scanners, off-axis motion and scan repeatability, scanner position sensor accuracy all have a direct impact on display image quality.

  9. Modelling MEMS deformable mirrors for astronomical adaptive optics

    NASA Astrophysics Data System (ADS)

    Blain, Celia

    As of July 2012, 777 exoplanets have been discovered utilizing mainly indirect detection techniques. The direct imaging of exoplanets is the next goal for astronomers, because it will reveal the diversity of planets and planetary systems, and will give access to the exoplanet's chemical composition via spectroscopy. With this spectroscopic knowledge, astronomers will be able to know, if a planet is terrestrial and, possibly, even find evidence of life. With so much potential, this branch of astronomy has also captivated the general public attention. The direct imaging of exoplanets remains a challenging task, due to (i) the extremely high contrast between the parent star and the orbiting exoplanet and (ii) their small angular separation. For ground-based observatories, this task is made even more difficult, due to the presence of atmospheric turbulence. High Contrast Imaging (HCI) instruments have been designed to meet this challenge. HCI instruments are usually composed of a coronagraph coupled with the full onaxis corrective capability of an Extreme Adaptive Optics (ExAO) system. An efficient coronagraph separates the faint planet's light from the much brighter starlight, but the dynamic boiling speckles, created by the stellar image, make exoplanet detection impossible without the help of a wavefront correction device. The Subaru Coronagraphic Extreme Adaptive Optics (SCExAO) system is a high performance HCI instrument developed at Subaru Telescope. The wavefront control system of SCExAO consists of three wavefront sensors (WFS) coupled with a 1024- actuator Micro-Electro-Mechanical-System (MEMS) deformable mirror (DM). MEMS DMs offer a large actuator density, allowing high count DMs to be deployed in small size beams. Therefore, MEMS DMs are an attractive technology for Adaptive Optics (AO) systems and are particularly well suited for HCI instruments employing ExAO technologies. SCExAO uses coherent light modulation in the focal plane introduced by the DM, for

  10. Design and analysis of an SOI MEMS voltage step-up converter

    NASA Astrophysics Data System (ADS)

    Gleeson, R.; Kraft, M.; White, N. M.

    2013-11-01

    This paper presents a comprehensive analysis of a MEMS voltage step-up converter for energy harvesting and other low-power applications. The step-up operation is based on isolating the charge of a mechanically variable capacitor and varying the gap between the electrodes by an appropriate method of providing an actuation force. A bi-stable device is discussed and was specifically designed for static energy harvesting. This device features a separate electrostatic actuator element to manipulate the variable capacitor electrodes. Prototypes were then fabricated using a dicing-free silicon-on-insulator process. The devices have been arbitrarily designed to produce an output voltage which is five times the magnitude of the input (M = 5). Due to leakage currents, it was necessary to cascade the MEMS capacitors in parallel to obtain a higher capacitance level. Parasitic fringing capacitances have a substantial impact on the overall capacitance value of the MEMS device and so the measured multiplication level of the devices is limited to M = 2.125. With four devices in parallel, a maximum output voltage of 35.4 V was obtained for a 24 V input was measured. However, a maximum output voltage of ≈60 V is achievable if the capacitance value was further increased by connecting more devices in parallel or if or the load resistance was increased beyond 1 GΩ.

  11. Dynamics simulation of MEMS device embedded-hard-disk-drive system

    NASA Astrophysics Data System (ADS)

    Yang, Jiaping; Chai, Jie; Lim, Boon Baun; Chen, Shixin

    2002-04-01

    Currently, hard disk drives (HHD) use rotating disks to store digital data and magnetic recording heads are flying on the disk to read/write data. The recording heads are mounted on a slider- suspension assembly, which makes heads move from one track to another on the disk. The heads movement is controlled by close-loop feedback servo system. It is well known that dynamic behaviors of head-slider-suspension-assembly (HSA) system are of great influence on the track per inch capacity of HDD1,2. As the problem is structurally complex, it is usually investigated using experimental methods or finite element simulation models 3. Furthermore, the dual-stage servo system, that is, a conventional VCM as the primary stage and a MEMS actuator as the secondary stage for MEMS device embedded HAS, has resulted in more difficulties in predicting HDD dynamic performance. This paper presents studies of the problem using macromodeling simulation approach. It applies efficient FEM based sub-structuring synthesis (SSS)4 and fast boundary element method (BEM) approaches incorporated with system dynamics technology to investigate dynamic characteristics of MEMS actuator embedded HAS system for HDD.

  12. Analysis of the bending stiffness and adhesion effect in RF-MEMS structures

    NASA Astrophysics Data System (ADS)

    Birleanu, C.; Pustan, M.; Dudescu, C.; Merie, V.; Pintea, I.

    2017-02-01

    Microelectromechanical system (MEMS) is a special branch with a wide range of applications in sensing, switching and actuating devices. Designing the reliable MEMS for thin free-standing structures like as bridges and cantilevers requires understanding of the tribomechanical properties of the materials and structures. The effect of geometrical dimensions (cross-section dimensions and length) on mechanical and tribological behavior of free-standing MEMS structures made of electroplated gold was analyzed in this paper. Special attention was given to the dependences between stiffness and cantilever length and the dependences between bending stress and variable travel range of actuated load. The force position was moved from the beams free-end toward to the anchor. The tests were performed at room temperature (22°C) and relative humidity RH of 40% with a noise- and vibration-isolated and environment-controlled XE-70 AFM from Park Systems using the contact mode. Each measurement was repeated many times in order to improve the accuracy of the experimental results. The stiffness of a microcantilever varies if the position of the acting force is changed. The experimental results obtained were in good correlation with those obtained analytically.

  13. Compact MEMS mirror based Q-switch module for pulse-on-demand laser range finders

    NASA Astrophysics Data System (ADS)

    Milanović, Veljko; Kasturi, Abhishek; Atwood, Bryan; Su, Yu; Limkrailassiri, Kevin; Nettleton, John E.; Goldberg, Lew; Cole, Brian J.; Hough, Nathaniel

    2015-02-01

    A highly compact and low power consuming Q-switch module was developed based on a fast single-axis MEMS mirror, for use in eye-safe battery-powered laser range finders The module's 1.6mm x 1.6mm mirror has <99% reflectance at 1535nm wavelength and can achieve mechanical angle slew rates of over 500 rad/sec when switching the Er/Yb:Glass lasing cavity from pumping to lasing state. The design targeted higher efficiency, smaller size, and lower cost than the traditional Electro-Optical Q-Switch. Because pulse-on-demand capability is required, resonant mirrors cannot be used to achieve the needed performance. Instead, a fast point-to-point analog single-axis tilt actuator was designed with a custom-coated high reflectance (HR) mirror to withstand the high intra-cavity laser fluence levels. The mirror is bonded on top of the MEMS actuator in final assembly. A compact MEMS controller was further implemented with the capability of autonomous on-demand operation based on user-provided digital trigger. The controller is designed to receive an external 3V power supply and a digital trigger and it consumes ~90mW during the short switching cycle and ~10mW in standby mode. Module prototypes were tested in a laser cavity and demonstrated high quality laser pulses with duration of ~20ns and energy of over 3mJ.

  14. Evaluation of a Programmable Voltage-Controlled MEMS Oscillator, Type SiT3701, Over a Wide Temperature Range

    NASA Technical Reports Server (NTRS)

    Patterson, Richard; Hammoud, Ahmad

    2009-01-01

    Semiconductor chips based on MEMS (Micro-Electro-Mechanical Systems) technology, such as sensors, transducers, and actuators, are becoming widely used in today s electronics due to their high performance, low power consumption, tolerance to shock and vibration, and immunity to electro-static discharge. In addition, the MEMS fabrication process allows for the miniaturization of individual chips as well as the integration of various electronic circuits into one module, such as system-on-a-chip. These measures would simplify overall system design, reduce parts count and interface, improve reliability, and reduce cost; and they would meet requirements of systems destined for use in space exploration missions. In this work, the performance of a recently-developed MEMS voltage-controlled oscillator was evaluated under a wide temperature range. Operation of this new commercial-off-the-shelf (COTS) device was also assessed under thermal cycling to address some operational conditions of the space environment

  15. Fabrication of Polyurethane Dielectric Actuators

    DTIC Science & Technology

    2005-01-01

    a summary of a 3 year Technology Investment Fund Project entitled “Dielectric Polymer Actuators for Active/ Passive Vibration Isolation”, which was...completed in March 2005. The purpose of this project was to investigate dielectric polymer materials for potential use in active/ passive vibration...devices and systems based on dielectric polymer actuators. Keywords: dielectric actuators, electroactive polymers , Technology Investment Fund 1

  16. Integrated MEMS-based variable optical attenuator and 10Gb/s receiver

    NASA Astrophysics Data System (ADS)

    Aberson, James; Cusin, Pierre; Fettig, H.; Hickey, Ryan; Wylde, James

    2005-03-01

    MEMS devices can be successfully commercialized in favour of competing technologies only if they offer an advantage to the customer in terms of lower cost or increased functionality. There are limited markets where MEMS can be manufactured cheaper than similar technologies due to large volumes: automotive, printing technology, wireless communications, etc. However, success in the marketplace can also be realized by adding significant value to a system at minimal cost or leverging MEMS technology when other solutions simply will not work. This paper describes a thermally actuated, MEMS based, variable optical attenuator that is co-packaged with existing opto-electronic devices to develop an integrated 10Gb/s SONET/SDH receiver. The configuration of the receiver opto-electronics and relatively low voltage availability (12V max) in optical systems bar the use of LCD, EO, and electro-chromic style attenuators. The device was designed and fabricated using a silicon-on-insulator (SOI) starting material. The design and performance of the device (displacement, power consumption, reliability, physical geometry) was defined by the receiver parameters geometry. This paper will describe how these design parameters (hence final device geometry) were determined in light of both the MEMS device fabrication process and the receiver performance. Reference will be made to the design tools used and the design flow which was a joint effort between the MEMS vendor and the end customer. The SOI technology offered a robust, manufacturable solution that gave the required performance in a cost-effective process. However, the singulation of the devices required the development of a new singulation technique that allowed large volumes of silicon to be removed during fabrication yet still offer high singulation yields.

  17. Programmable Aperture with MEMS Microshutter Arrays

    NASA Technical Reports Server (NTRS)

    Moseley, Samuel; Li, Mary; Kutyrev, Alexander; Kletetschka, Gunther; Fettig, Rainer

    2011-01-01

    A microshutter array (MSA) has been developed for use as an aperture array for multi-object selections in James Webb Space Telescope (JWST) technology. Light shields, molybdenum nitride (MoN) coating on shutters, and aluminum/aluminum oxide coatings on interior walls are put on each shutter for light leak prevention, and to enhance optical contrast. Individual shutters are patterned with a torsion flexure that permits shutters to open 90 deg. with a minimized mechanical stress concentration. The shutters are actuated magnetically, latched, and addressed electrostatically. Also, micromechanical features are tailored onto individual shutters to prevent stiction. An individual shutter consists of a torsion hinge, a shutter blade, a front electrode that is coated on the shutter blade, a backside electrode that is coated on the interior walls, and a magnetic cobalt-iron coating. The magnetic coating is patterned into stripes on microshutters so that shutters can respond to an external magnetic field for the magnetic actuation. A set of column electrodes is placed on top of shutters, and a set of row electrodes on sidewalls is underneath the shutters so that they can be electrostatically latched open. A linear permanent magnet is aligned with the shutter rows and is positioned above a flipped upside-down array, and sweeps across the array in a direction parallel to shutter columns. As the magnet sweeps across the array, sequential rows of shutters are rotated from their natural horizontal orientation to a vertical open position, where they approach vertical electrodes on the sidewalls. When the electrodes are biased with a sufficient electrostatic force to overcome the mechanical restoring force of torsion bars, shutters remain latched to vertical electrodes in their open state. When the bias is removed, or is insufficient, the shutters return to their horizontal, closed positions. To release a shutter, both the electrode on the shutter and the one on the back wall where

  18. Localized heating/bonding techniques in MEMS packaging

    NASA Astrophysics Data System (ADS)

    Mabesa, J. R., Jr.; Scott, A. J.; Wu, X.; Auner, G. W.

    2005-05-01

    Packaging is used to protect and enable intelligent sensor systems utilized in manned/unmanned ground vehicle systems/subsystems. Because Micro electro mechanical systems (MEMS) are used often in these sensor or actuation products, it must interact with the surrounding environment, which may be in direct conflict with the desire to isolate the electronics for improved reliability/durability performance. For some very simple devices, performance requirements may allow a high degree of isolation from the environment (e.g., stints and accelerometers). Other more complex devices (i.e. chemical and biological analysis systems, particularly in vivo systems) present extremely complex packaging requirements. Power and communications to MEMS device arrays are also extremely problematic. The following describes the research being performed at the U.S. Army Research, Development, and Engineering Command (RDECOM) Tank and Automotive Research, Development, and Engineering Center (TARDEC), in collaboration with Wayne State University, in Detroit, MI. The focus of the packaging research is limited to six main categories: a) provision for feed-through for electrical, optical, thermal, and fluidic interfaces; b) environmental management including atmosphere, hermiticity, and temperature; c) control of stress and mechanical durability; d) management of thermal properties to minimize absorption and/or emission; e) durability and structural integrity; and f) management of RF/magnetic/electrical and optical interference and/or radiation properties and exposure.

  19. Haltere Mechanics and Mechanical Logic for Micro-Electro-Mechanical Systems (MEMS) Scale Bio-inspired Navigation Sensors

    DTIC Science & Technology

    2012-02-01

    world’s smallest angular rate sensor. 2. Approach Proprioceptive sensors enable mobility control for mm-scale robotics and are essential to achieving...scale flapping wing platforms requires three types of proprioceptive control. These include a means of orientation control, three-axis relative...The MEMS ARS are designed to be capable of being monolithically integrated with piezoelectric mobility actuators, thus enabling direct proprioceptive

  20. "Mighty Worm" Piezoelectric Actuator

    NASA Technical Reports Server (NTRS)

    Bamford, Robert M.; Wada, Ben K.; Moore, Donald M.

    1994-01-01

    "Mighty Worm" piezoelectric actuator used as adjustable-length structural member, active vibrator or vibration suppressor, and acts as simple (fixed-length) structural member when inactive. Load force not applied to piezoelectric element in simple-structural-member mode. Piezoelectric element removed from load path when not in use.

  1. Shape Memory Alloy Actuator

    NASA Technical Reports Server (NTRS)

    Baumbick, Robert J. (Inventor)

    2002-01-01

    The present invention discloses and teaches a unique, remote optically controlled micro actuator particularly suitable for aerospace vehicle applications wherein hot gas, or in the alternative optical energy, is employed as the medium by which shape memory alloy elements are activated. In gas turbine powered aircraft the source of the hot gas may be the turbine engine compressor or turbine sections.

  2. Shape Memory Alloy Actuator

    NASA Technical Reports Server (NTRS)

    Baumbick, Robert J. (Inventor)

    2000-01-01

    The present invention discloses and teaches a unique, remote optically controlled micro actuator particularly suitable for aerospace vehicle applications wherein hot gas, or in the alternative optical energy, is employed as the medium by which shape memory alloy elements are activated. In gas turbine powered aircraft the source of the hot gas may be the turbine engine compressor or turbine sections.

  3. Electromechanical flight control actuator

    NASA Technical Reports Server (NTRS)

    1979-01-01

    The feasibility of using an electromechanical actuator (EMA) as the primary flight control equipment in aerospace flight is examined. The EMA motor design is presented utilizing improved permanent magnet materials. The necessary equipment to complete a single channel EMA using the single channel power electronics breadboard is reported. The design and development of an improved rotor position sensor/tachometer is investigated.

  4. Piezoelectric actuator renaissance

    NASA Astrophysics Data System (ADS)

    Uchino, Kenji

    2015-03-01

    This paper resumes the content of the invited talk of the author, read at the occasion of the International Workshop on Relaxor Ferroelectrics, IWRF 14, held on October 12-16, 2014 in Stirin, Czech Republic. It reviews the recent advances in materials, designing concepts, and new applications of piezoelectric actuators, as well as the future perspectives of this area.

  5. Integration of optoelectronics and MEMS by free-space micro-optics

    SciTech Connect

    WARREN,MIAL E.; SPAHN,OLGA B.; SWEATT,WILLIAM C.; SHUL,RANDY J.; WENDT,JOEL R.; VAWTER,GREGORY A.; KRYGOWSKI,TOM W.; REYES,DAVID NMN; RODGERS,M. STEVEN; SNIEGOWSKI,JEFFRY J.

    2000-06-01

    This report represents the completion of a three-year Laboratory-Directed Research and Development (LDRD) program to investigate combining microelectromechanical systems (MEMS) with optoelectronic components as a means of realizing compact optomechanical subsystems. Some examples of possible applications are laser beam scanning, switching and routing and active focusing, spectral filtering or shattering of optical sources. The two technologies use dissimilar materials with significant compatibility problems for a common process line. This project emphasized a hybrid approach to integrating optoelectronics and MEMS. Significant progress was made in developing processing capabilities for adding optical function to MEMS components, such as metal mirror coatings and through-vias in the substrate. These processes were used to demonstrate two integration examples, a MEMS discriminator driven by laser illuminated photovoltaic cells and a MEMS shutter or chopper. Another major difficulty with direct integration is providing the optical path for the MEMS components to interact with the light. The authors explored using folded optical paths in a transparent substrate to provide the interconnection route between the components of the system. The components can be surface-mounted by flip-chip bonding to the substrate. Micro-optics can be fabricated into the substrate to reflect and refocus the light so that it can propagate from one device to another and them be directed out of the substrate into free space. The MEMS components do not require the development of transparent optics and can be completely compatible with the current 5-level polysilicon process. They report progress on a MEMS-based laser scanner using these concepts.

  6. Thermally Actuated Hydraulic Pumps

    NASA Technical Reports Server (NTRS)

    Jones, Jack; Ross, Ronald; Chao, Yi

    2008-01-01

    Thermally actuated hydraulic pumps have been proposed for diverse applications in which direct electrical or mechanical actuation is undesirable and the relative slowness of thermal actuation can be tolerated. The proposed pumps would not contain any sliding (wearing) parts in their compressors and, hence, could have long operational lifetimes. The basic principle of a pump according to the proposal is to utilize the thermal expansion and contraction of a wax or other phase-change material in contact with a hydraulic fluid in a rigid chamber. Heating the chamber and its contents from below to above the melting temperature of the phase-change material would cause the material to expand significantly, thus causing a substantial increase in hydraulic pressure and/or a substantial displacement of hydraulic fluid out of the chamber. Similarly, cooling the chamber and its contents from above to below the melting temperature of the phase-change material would cause the material to contract significantly, thus causing a substantial decrease in hydraulic pressure and/or a substantial displacement of hydraulic fluid into the chamber. The displacement of the hydraulic fluid could be used to drive a piston. The figure illustrates a simple example of a hydraulic jack driven by a thermally actuated hydraulic pump. The pump chamber would be a cylinder containing encapsulated wax pellets and containing radial fins to facilitate transfer of heat to and from the wax. The plastic encapsulation would serve as an oil/wax barrier and the remaining interior space could be filled with hydraulic oil. A filter would retain the encapsulated wax particles in the pump chamber while allowing the hydraulic oil to flow into and out of the chamber. In one important class of potential applications, thermally actuated hydraulic pumps, exploiting vertical ocean temperature gradients for heating and cooling as needed, would be used to vary hydraulic pressures to control buoyancy in undersea research

  7. Integration of microwave MEMS devices into rectangular waveguide with conductive polymer interposers

    NASA Astrophysics Data System (ADS)

    Baghchehsaraei, Zargham; Sterner, Mikael; Åberg, Jan; Oberhammer, Joachim

    2013-12-01

    This paper investigates a novel method of integrating microwave microelectromechanical systems (MEMS) chips into millimeter-wave rectangular waveguides. The fundamental difficulties of merging micromachined with macromachined microwave components, in particular, surface topography, roughness, mechanical stress points and air gaps interrupting the surface currents, are overcome by a double-side adhesive conductive polymer interposer. This interposer provides a uniform electrical contact, stable mechanical connection and a compliant stress distribution interlayer between the MEMS chip and a waveguide frame. The integration method is successfully implemented both for prototype devices of MEMS-tuneable reflective metamaterial surfaces and for MEMS reconfigurable transmissive surfaces. The measured insertion loss of the novel conductive polymer interface is less than 0.4 dB in the E-band (60-90 GHz), as compared to a conventional assembly with an air gap of 2.5 dB loss. Moreover, both dc biasing lines and mechanical feedthroughs to actuators outside the waveguide are demonstrated in this paper, which is achieved by structuring the polymer sheet xurographically. Finite element method simulations were carried out for analyzing the influence of different parameters on the radio frequency performance.

  8. PolyMUMPs MEMS device to measure mechanical stiffness of single cells in aqueous media

    NASA Astrophysics Data System (ADS)

    Warnat, S.; King, H.; Forbrigger, C.; Hubbard, T.

    2015-02-01

    A method of experimentally determining the mechanical stiffness of single cells by using differential displacement measurements in a two stage spring system is presented. The spring system consists of a known MEMS reference spring and an unknown cellular stiffness: the ratio of displacements is related to the ratio of stiffness. A polyMUMPs implementation for aqueous media is presented and displacement measurements made from optical microphotographs using a FFT based displacement method with a repeatability of ~20 nm. The approach was first validated on a MEMS two stage spring system of known stiffness. The measured stiffness ratios of control structures (i) MEMS spring systems and (ii) polystyrene microspheres were found to agree with theoretical values. Mechanical tests were then performed on Saccharomyces cerevisiae (Baker’s yeast) in aqueous media. Cells were placed (using a micropipette) inside MEMS measuring structures and compressed between two jaws using an electrostatic actuator and displacements measured. Tested cells showed stiffness values between 5.4 and 8.4 N m-1 with an uncertainty of 11%. In addition, non-viable cells were tested by exposing viable cells to methanol. The resultant mean cell stiffness dropped by factor of 3 × and an explicit discrimination between viable and non-viable cells based on mechanical stiffness was seen.

  9. Applications of ferrofluids in Micro Electro Mechanical Systems (MEMS) and micropumps

    NASA Astrophysics Data System (ADS)

    Jain, V. K.; Pant, R. P.; Vinod Kumar, .

    2008-12-01

    The micro-pump is one of the most promising micro-flow devices. At micro-level electronically controlled pumping of any fluid by a mechanical pump is not so easy and reliable. In the realm of nano-tech materials, ferrofluids have unique properties in both liquids and solids and have potential applications for MEMS/NEMS devices. This paper presents two new types of concepts, a micro-flowmeter based on a micro-turbine made using MEMS technology and the other is a micro-pump based on ferrofluidic actuation. In our first device an optical photovoltaic sensor has also been integrated with this device, and the micro-turbine rotates with a speed of 50000 rpm. We have fabricated a ferrofluid-based glass micro-pump of size 20 × 20 × 10 mm^{3}, in which micro actuation is electrically controlled by NdFeB (N50) permanent magnets (diameter 5 × 3 mm, B_{r} = 1400 mT, coercive field H_c=840 ,kA/m) with a ferrofluid bearing. The device is able to pump the fluid at the rate of 10 μ L/actuation. Figs 3, Refs 19.

  10. Characterization of nonplanar motion in MEMS involving scanning laser interferometry

    NASA Astrophysics Data System (ADS)

    Lawton, Russell A.; Abraham, Margaret H.; Lawrence, Eric

    1999-08-01

    A study to evaluate three processes used for the release of standard devices produced by MCNC using the MUMPS process was undertaken by Jet Propulsion Laboratory with the collaboration of The Aerospace Corporation, and Polytec PI. The processes used were developed at various laboratories and are commonly the final step in the production of micro- electro-mechanical systems prior to packaging. It is at this stage of the process when the devices become extremely delicate and are subject to yield losses due to handling errors or the phenomenon of stiction. The effects of post processing with HF on gain boundaries and subsequent thermal processing producing native oxide growth during packaging will require further investigation.

  11. Dielectric Actuation of Polymers

    NASA Astrophysics Data System (ADS)

    Niu, Xiaofan

    Dielectric polymers are widely used in a plurality of applications, such as electrical insulation, dielectric capacitors, and electromechanical actuators. Dielectric polymers with large strain deformations under an electric field are named dielectric elastomers (DE), because of their relative low modulus, high elongation at break, and outstanding resilience. Dielectric elastomer actuators (DEA) are superior to traditional transducers as a muscle-like technology: large strains, high energy densities, high coupling efficiency, quiet operation, and light weight. One focus of this dissertation is on the design of DE materials with high performance and easy processing. UV radiation curing of reactive species is studied as a generic synthesis methodology to provide a platform for material scientists to customize their own DE materials. Oligomers/monomers, crosslinkers, and other additives are mixed and cured at appropriate ratios to control the stress-strain response, suppress electromechanical instability of the resulting polymers, and provide stable actuation strains larger than 100% and energy densities higher than 1 J/g. The processing is largely simplified in the new material system by removal of the prestretching step. Multilayer stack actuators with 11% linear strain are demonstrated in a procedure fully compatible with industrial production. A multifunctional DE derivative material, bistable electroactive polymer (BSEP), is invented enabling repeatable rigid-to-rigid deformation without bulky external structures. Bistable actuation allows the polymer actuator to have two distinct states that can support external load without device failure. Plasticizers are used to lower the glass transition temperature to 45 °C. Interpenetrating polymer network structure is established inside the BSEP to suppress electromechanical instability, providing a breakdown field of 194 MV/m and a stable bistable strain as large as 228% with a 97% strain fixity. The application of BSEP

  12. Comparison of theoretical and experimental determination of the flexing of scratch drive actuator plates

    NASA Astrophysics Data System (ADS)

    Li, Lijie; Brown, James G.; Uttamchandani, Deepak G.

    2002-09-01

    The scratch drive actuator (SDA) is a key element in microelectromechanical System (MEMS) technology. The actuator can be designed to travel very long distance with precise step size. Various articles describe the characteristics of scratch drive actuators.3, 6, 8 The MEMS designer needs models of SDA in order to incorporate them into their Microsystems applications. The objective of our effort is to develop models for SDA when it is in the working state. In this paper, a suspended SDA plate actuated by electrostatic force is analyzed. A mathematical model is established based on electrostatic coupled mechanical theory. Two phases have been calculated because the plate will contact the bottom surface due to the electrostatic force. One phase is named non-contact mode, and another is named contact mode. From these two models, the relationship between applied voltage and contact distance has been obtained. The geometrical model of bending plate is established to determine the relationship between contact distance and step size. Therefore we can use those two results to obtain the result of step size versus applied voltage that we expect. Finally, couple-field electro-mechanical simulation has been done by commercial software IntelliSuite. We assume that the dimension of SDA plate and bushing are fixed. All the material properties are from JDSU Cronos MUMPs. A Veeco NT1000 surface profiling tool has been used to investigate the bending of SDA plate. The results of experimental and theoretical are compared.

  13. Characterization and modeling of electrostatically actuated polysilicon micromechanical devices

    NASA Astrophysics Data System (ADS)

    Chan, Edward Keat Leem

    Sensors, actuators, transducers, microsystems and MEMS (MicroElertroMechanical Systems) are some of the terms describing technologies that interface information processing systems with the physical world. Electrostatically actuated micromechanical devices are important building blocks in many of these technologies. Arrays of these devices are used in video projection displays, fluid pumping systems, optical communications systems, tunable lasers and microwave circuits. Well-calibrated simulation tools are essential for propelling ideas from the drawing board into production. This work characterizes a fabrication process---the widely-used polysilicon MUMPs process---to facilitate the design of electrostatically actuated micromechanical devices. The operating principles of a representative device---a capacitive microwave switch---are characterized using a wide range of electrical and optical measurements of test structures along with detailed electromechanical simulations. Consistency in the extraction of material properties from measurements of both pull-in voltage and buckling amplitude is demonstrated. Gold is identified as an area-dependent source of nonuniformity in polysilicon thicknesses and stress. Effects of stress gradients, substrate curvature, and film coverage are examined quantitatively. Using well-characterized beams as in-situ surface probes, capacitance-voltage and surface profile measurements reveal that compressible surface residue modifies the effective electrical gap when the movable electrode contacts an underlying silicon nitride layer. A compressible contact surface model used in simulations improves the fit to measurements. In addition, the electric field across the nitride causes charge to build up in the nitride, increasing the measured capacitance over time. The rate of charging corresponds to charge injection through direct tunneling. A novel actuator that can travel stably beyond one-third of the initial gap (a trademark limitation of

  14. Computer Microvision for Microelectromechanical Systems (MEMS)

    DTIC Science & Technology

    2003-11-01

    AFRL-IF-RS-TR-2003-270 Final Technical Report November 2003 COMPUTER MICROVISION FOR MICROELECTROMECHANICAL SYSTEMS (MEMS...May 97 – Jun 03 4. TITLE AND SUBTITLE COMPUTER MICROVISION FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) 6. AUTHOR(S) Dennis M. Freeman 5...developed a patented multi-beam interferometric method for imaging MEMS, launched a collaborative Computer Microvision Remote Test Facility using DARPA’s

  15. Miniaturized GPS/MEMS IMU integrated board

    NASA Technical Reports Server (NTRS)

    Lin, Ching-Fang (Inventor)

    2012-01-01

    This invention documents the efforts on the research and development of a miniaturized GPS/MEMS IMU integrated navigation system. A miniaturized GPS/MEMS IMU integrated navigation system is presented; Laser Dynamic Range Imager (LDRI) based alignment algorithm for space applications is discussed. Two navigation cameras are also included to measure the range and range rate which can be integrated into the GPS/MEMS IMU system to enhance the navigation solution.

  16. MEMS-enabled implantable drug infusion pumps for laboratory animal research, preclinical, and clinical applications

    PubMed Central

    Meng, Ellis; Hoang, Tuan

    2012-01-01

    Innovation in implantable drug delivery devices is needed for novel pharmaceutical compounds such as certain biologics, gene therapy, and other small molecules that are not suitable for administration by oral, topical, or intravenous routes. This invasive dosing scheme seeks to directly bypass physiological barriers presented by the human body, release the appropriate drug amount at the site of treatment, and maintain the drug bioavailability for the required duration of administration to achieve drug efficacy. Advances in microtechnologies have led to novel MEMS-enabled implantable drug infusion pumps with unique performance and feature sets. In vivo demonstration of micropumps for laboratory animal research and preclinical studies include acute rapid radiolabeling, short-term delivery of nanomedicine for cancer treatment, and chronic ocular drug dosing. Investigation of MEMS actuators, valves, and other microstructures for on-demand dosing control may enable next generation implantable pumps with high performance within a miniaturized form factor for clinical applications. PMID:22926321

  17. Monitoring the performance of geosynthetic materials within pavement systems using MEMS

    NASA Astrophysics Data System (ADS)

    Attoh-Okine, Nii O.; Ayenu-Prah, Albert Y.; Mensah, Stephen A.

    2005-05-01

    Geosynthetic materials have found useful applications when unbound aggregates have been placed on cohesive soil with very weak subgrade. They have also been successfully used in retarding reflective cracking in both flexible and composite pavements. There are many applications of geosynthetics in pavement engineering yet there is considerable lack of understanding in the behavior of the material. Geosynthetic materials exhibit very peculiar properties in the area of tensile strength and reinforcement. MEMS are miniature sensing or actuating devices that can interact with other environments (provided no adverse reaction occurs) to either obtain information or alter it. With remote query capability, it appears such devices can be embedded in pavement systems as testing and monitoring tools. The aim of this paper is to propose both field and laboratory methods for monitoring geotextile performance using MEMS.

  18. MEMS atomizer based on Rayleigh instability-driven breakup of filaments

    NASA Astrophysics Data System (ADS)

    Kong, Yen-Peng; Tay, Francis E.; Xu, Yuan

    2000-10-01

    In this paper, simulation studies to determine the feasibility of producing filaments using `drop and demand' techniques are presented. These filaments will break up into droplets due to the phenomena caused by Rayleigh instability. In the biomedical applications, for effective pulmonary drug delivery of insulin, for example, the drug particles must be in the range of 1 to 5 microns in size. This stringent requirement is also encountered in gas flow seeding for Laser Doppler Velocimetry studies. A piezoelectrically actuated MEMS atomizer based on Rayleigh instability-driven break-up of filaments has been designed to meet this requirement. Although the formation of droplets from jets has been used extensively in ink-jet printing, the currently presented mode of droplet formulation has yet to be demonstrated in a MEMS device.

  19. Reliability Issues of COTS MEMS Packaging

    NASA Technical Reports Server (NTRS)

    Gharrarian, R.

    2000-01-01

    During the last decade, research and development of microelectromechanical systems (MEMS) has shown a significant promise for a variety of commercial applications including automobile and medical purposes.

  20. Surface chemistry and tribology of MEMS.

    PubMed

    Maboudian, Roya; Carraro, Carlo

    2004-01-01

    The microscopic length scale and high surface-to-volume ratio, characteristic of microelectro-mechanical systems (MEMS), dictate that surface properties are of paramount importance. This review deals with the effects of surface chemical treatments on tribological properties (adhesion, friction, and wear) of MEMS devices. After a brief review of materials and processes that are utilized in MEMS technology, the relevant tribological and chemical issues are discussed. Various MEMS microinstruments are discussed, which are commonly employed to perform adhesion, friction, and wear measurements. The effects of different surface treatments on the reported tribological properties are discussed.

  1. From optical MEMS to photonic crystal

    NASA Astrophysics Data System (ADS)

    Lee, Sukhan; Kim, Jideog; Lee, Hong-Seok; Moon, Il-Kwon; Won, JongHwa; Ku, Janam; Choi, Hyung; Shin, Hyungjae

    2002-10-01

    This paper presents the emergence of photonic crystals as significant optomechatronics components, following optical MEMS. It is predicted that, in the coming years, optical MEMS and photonic crystals may go through dynamic interactions leading to synergy as well as competition. First, we present the Structured Defect Photonic Crystal (SDPCTM) devised by the authors for providing the freedom of designing photonic bandgap structures, such that the application of photonic crystals be greatly extended. Then, we present the applications of optical MEMS and photonic crystals to displays and telecommunications. It is shown that many of the applications that optical MEMS can contribute to telecommunications and displays may be implemented by photonic crystals.

  2. Optical analysis of scanning microstereolithography systems

    NASA Astrophysics Data System (ADS)

    Deshmukh, Suhas P.; Dubey, Shashikant; Gandhi, P. S.

    2006-01-01

    Microstereolithography (MSL) is rapidly developing technique for micro-fabrication. Vector-by-vector scanning MSL has a potential to create true 3D micro-devices as compared to mostly planar (2D-2 1/2 D) devices fabricated by conventional MEMS techniques. Previous literature shows two different scanning methods:(1) Galvanomirror scanning, (2) Photoreactor tank scanning. Galvanomirror scanning technique has higher fabrication speed but poor resolution because of defocusing of laser spot on the resin surface. Photo-reactor tank scanning has higher resolution but produces a wavy structures and limited speed of fabrication. This paper proposes and develops an offaxis lens scanning technique for MSL and carries out optical analysis to compare its performance with the existing techniques mentioned above. The comparison clearly demonstrates improved performance with the proposed offaxis lens scanning technique.

  3. Microfabricated therapeutic actuator mechanisms

    DOEpatents

    Northrup, M.A.; Ciarlo, D.R.; Lee, A.P.; Krulevitch, P.A.

    1997-07-08

    Electromechanical microstructures (microgrippers), either integrated circuit (IC) silicon-based or precision machined, to extend and improve the application of catheter-based interventional therapies for the repair of aneurysms in the brain or other interventional clinical therapies. These micromechanisms can be specifically applied to release platinum coils or other materials into bulging portions of the blood vessels also known as aneurysms. The ``micro`` size of the release mechanism is necessary since the brain vessels are the smallest in the body. Through a catheter more than one meter long, the micromechanism located at one end of the catheter can be manipulated from the other end thereof. The microgripper (micromechanism) of the invention will also find applications in non-medical areas where a remotely actuated microgripper or similar actuator would be useful or where micro-assembling is needed. 22 figs.

  4. Microfabricated therapeutic actuator mechanisms

    DOEpatents

    Northrup, Milton A.; Ciarlo, Dino R.; Lee, Abraham P.; Krulevitch, Peter A.

    1997-01-01

    Electromechanical microstructures (microgrippers), either integrated circuit (IC) silicon-based or precision machined, to extend and improve the application of catheter-based interventional therapies for the repair of aneurysms in the brain or other interventional clinical therapies. These micromechanisms can be specifically applied to release platinum coils or other materials into bulging portions of the blood vessels also known as aneurysms. The "micro" size of the release mechanism is necessary since the brain vessels are the smallest in the body. Through a catheter more than one meter long, the micromechanism located at one end of the catheter can be manipulated from the other end thereof. The microgripper (micromechanism) of the invention will also find applications in non-medical areas where a remotely actuated microgripper or similar actuator would be useful or where micro-assembling is needed.

  5. Electrical Actuation Technology Bridging

    NASA Technical Reports Server (NTRS)

    Hammond, Monica (Compiler); Sharkey, John (Compiler)

    1993-01-01

    This document contains the proceedings of the NASA Electrical Actuation Technology Bridging (ELA-TB) Workshop held in Huntsville, Alabama, September 29-October 1, 1992. The workshop was sponsored by the NASA Office of Space Systems Development and Marshall Space Flight Center (MSFC). The workshop addressed key technologies bridging the entire field of electrical actuation including systems methodology, control electronics, power source systems, reliability, maintainability, and vehicle health management with special emphasis on thrust vector control (TVC) applications on NASA launch vehicles. Speakers were drawn primarily from industry with participation from universities and government. In addition, prototype hardware demonstrations were held at the MSFC Propulsion Laboratory each afternoon. Splinter sessions held on the final day afforded the opportunity to discuss key issues and to provide overall recommendations. Presentations are included in this document.

  6. Microfabricated therapeutic actuators

    DOEpatents

    Lee, Abraham P.; Northrup, M. Allen; Ciarlo, Dino R.; Krulevitch, Peter A.; Benett, William J.

    1999-01-01

    Microfabricated therapeutic actuators are fabricated using a shape memory polymer (SMP), a polyurethane-based material that undergoes a phase transformation at a specified temperature (Tg). At a temperature above temperature Tg material is soft and can be easily reshaped into another configuration. As the temperature is lowered below temperature Tg the new shape is fixed and locked in as long as the material stays below temperature Tg. Upon reheating the material to a temperature above Tg, the material will return to its original shape. By the use of such SMP material, SMP microtubing can be used as a release actuator for the delivery of embolic coils through catheters into aneurysms, for example. The microtubing can be manufactured in various sizes and the phase change temperature Tg is determinate for an intended temperature target and intended use.

  7. Microfabricated therapeutic actuators

    DOEpatents

    Lee, A.P.; Northrup, M.A.; Ciarlo, D.R.; Krulevitch, P.A.; Benett, W.J.

    1999-06-15

    Microfabricated therapeutic actuators are fabricated using a shape memory polymer (SMP), a polyurethane-based material that undergoes a phase transformation at a specified temperature (Tg). At a temperature above temperature Tg material is soft and can be easily reshaped into another configuration. As the temperature is lowered below temperature Tg the new shape is fixed and locked in as long as the material stays below temperature Tg. Upon reheating the material to a temperature above Tg, the material will return to its original shape. By the use of such SMP material, SMP microtubing can be used as a release actuator for the delivery of embolic coils through catheters into aneurysms, for example. The microtubing can be manufactured in various sizes and the phase change temperature Tg is determinate for an intended temperature target and intended use. 8 figs.

  8. Scissor thrust valve actuator

    DOEpatents

    DeWall, Kevin G.; Watkins, John C; Nitzel, Michael E.

    2006-08-29

    Apparatus for actuating a valve includes a support frame and at least one valve driving linkage arm, one end of which is rotatably connected to a valve stem of the valve and the other end of which is rotatably connected to a screw block. A motor connected to the frame is operatively connected to a motor driven shaft which is in threaded screw driving relationship with the screw block. The motor rotates the motor driven shaft which drives translational movement of the screw block which drives rotatable movement of the valve driving linkage arm which drives translational movement of the valve stem. The valve actuator may further include a sensory control element disposed in operative relationship with the valve stem, the sensory control element being adapted to provide control over the position of the valve stem by at least sensing the travel and/or position of the valve stem.

  9. MEMS based miniature FT-IR engine with built-in photodetector

    NASA Astrophysics Data System (ADS)

    Warashina, Yoshihisa; Suzuki, Tomofumi; Kasamori, Kohei; Okumura, Ryosuke; Matsuo, Yuki; Takemura, Mitsutaka

    2014-03-01

    A MEMS-FTIR engine has been developed as a key device for the Fourier-Transform Infrared Spectrometer, which consists of a Michelson interferometer including an electro-static actuator to control a moving mirror, an optical fiber groove for incident light and a photodetector. All these elements except for the photodetector are monolithically fabricated in Silicon using MEMS technology. The optical elements such as a beam splitter, a fixed mirror and a moving mirror are formed and aligned simultaneously with high degree of precision by Deep Reactive Ion Etching (DRIE). The vertical side walls are utilized as optical planes so that the incident light path is located in parallel with the Silicon substrate. The moving mirror is driven by an electro-static MEMS actuator. The photodetector is placed above an angled mirror, which is formed by alkaline wet etching exposing the Silicon crystal plane at the end position of light path. All the elements including the photodetector are hermetically covered by a lid of Silicon in the vacuum chamber by using a surface activate bonding technology. In order to reduce the cost, wafer level process and separation of each chip by a laser dicer after all assembly processes are introduced. The realized MEMS-FTIR is 10×17×1 mm in size and a signal noise ratio (SNR) of better than 35dB, which comes from a good verticality of less than 0.2 degree in the vertical side walls as optical planes by managing the DRIE etching conditions.

  10. Two-axis polydimethylsiloxane-based electromagnetic microelectromechanical system scanning mirror for optical coherence tomography

    NASA Astrophysics Data System (ADS)

    Kim, Sehui; Lee, Changho; Kim, Jin Young; Kim, Jeehyun; Lim, Geunbae; Kim, Chulhong

    2016-10-01

    Compact size and fast imaging abilities are key requirements for the clinical implementation of an optical coherence tomography (OCT) system. Among the various small-sized technology, a microelectromechanical system (MEMS) scanning mirror is widely used in a miniaturized OCT system. However, the complexities of conventional MEMS fabrication processes and relatively high costs have restricted fast clinical translation and commercialization of the OCT systems. To resolve these problems, we developed a two-axis polydimethylsiloxane (PDMS)-based MEMS (2A-PDMS-MEMS) scanning mirror through simple processes with low costs. It had a small size of 15×15×15 mm3, was fast, and had a wide scanning range at a low voltage. The AC/DC responses were measured to evaluate the performance of the 2A-PDMS-MEMS scanning mirror. The maximum scanning angles were measured as ±16.6 deg and ±11.6 deg along the X and Y axes, respectively, and the corresponding field of view was 29.8 mm×20.5 mm with an optical focal length of 50 mm. The resonance frequencies were 82 and 57 Hz along the X and Y axes, respectively. Finally, in vivo B-scan and volumetric OCT images of human fingertips and palms were successfully acquired using the developed SD-OCT system based on the 2A-PDMS-MEMS scanning mirror.

  11. Dissolution actuated sample container

    SciTech Connect

    Nance, Thomas A.; McCoy, Frank T.

    2013-03-26

    A sample collection vial and process of using a vial is provided. The sample collection vial has an opening secured by a dissolvable plug. When dissolved, liquids may enter into the interior of the collection vial passing along one or more edges of a dissolvable blocking member. As the blocking member is dissolved, a spring actuated closure is directed towards the opening of the vial which, when engaged, secures the vial contents against loss or contamination.

  12. Shape memory alloy actuator

    DOEpatents

    Varma, Venugopal K.

    2001-01-01

    An actuator for cycling between first and second positions includes a first shaped memory alloy (SMA) leg, a second SMA leg. At least one heating/cooling device is thermally connected to at least one of the legs, each heating/cooling device capable of simultaneously heating one leg while cooling the other leg. The heating/cooling devices can include thermoelectric and/or thermoionic elements.

  13. Thermally actuated thermionic switch

    DOEpatents

    Barrus, Donald M.; Shires, Charles D.

    1988-01-01

    A thermally actuated thermionic switch which responds to an increase of temperature by changing from a high impedance to a low impedance at a predictable temperature set point. The switch has a bistable operation mode switching only on temperature increases. The thermionic material may be a metal which is liquid at the desired operation temperature and held in matrix in a graphite block reservoir, and which changes state (ionizes, for example) so as to be electrically conductive at a desired temperature.

  14. Thermally actuated thermionic switch

    DOEpatents

    Barrus, D.M.; Shires, C.D.

    1982-09-30

    A thermally actuated thermionic switch which responds to an increase of temperature by changing from a high impedance to a low impedance at a predictable temperature set point. The switch has a bistable operation mode switching only on temperature increases. The thermionic material may be a metal which is liquid at the desired operation temperature and held in matrix in a graphite block reservoir, and which changes state (ionizes, for example) so as to be electrically conductive at a desired temperature.

  15. Shape Memory Actuator System

    DTIC Science & Technology

    1998-07-31

    The advantage in utilizing 15 shape-memory cables made of Nitinol for size reduction of the remote control actuator system is 1 Fi well suited for...a submarine environment because of its non-magnetic and corrosion resistance 17 properties. Use of thermoelastic Nitinol introduces other...problems because of the cooling and 18 resetting properties of Nitinol cables. It is therefore an important object of the present invention 19 on to

  16. Passively actuated valve

    SciTech Connect

    Modro, S. Michael; Ougouag, Abderrafi M.

    2005-09-20

    A passively actuated valve for isolating a high pressure zone from a low pressure zone and discontinuing the isolation when the pressure in the high pressure zone drops below a preset threshold. If the pressure in the high pressure zone drops below the preset threshold, the valve opens and allows flow from the high pressure zone to the low pressure zone. The valve remains open allowing pressure equalization and back-flow should a pressure inversion between the two pressure zone occur.

  17. Linear mass actuator

    NASA Technical Reports Server (NTRS)

    Holloway, Sidney E., III (Inventor); Crossley, Edward A., Jr. (Inventor); Jones, Irby W. (Inventor); Miller, James B. (Inventor); Davis, C. Calvin (Inventor); Behun, Vaughn D. (Inventor); Goodrich, Lewis R., Sr. (Inventor)

    1992-01-01

    A linear mass actuator includes an upper housing and a lower housing connectable to each other and having a central passageway passing axially through a mass that is linearly movable in the central passageway. Rollers mounted in the upper and lower housings in frictional engagement with the mass translate the mass linearly in the central passageway and drive motors operatively coupled to the roller means, for rotating the rollers and driving the mass axially in the central passageway.

  18. Cylindrical Piezoelectric Fiber Composite Actuators

    NASA Technical Reports Server (NTRS)

    Allison, Sidney G.; Shams, Qamar A.; Fox, Robert L.

    2008-01-01

    The use of piezoelectric devices has become widespread since Pierre and Jacques Curie discovered the piezoelectric effect in 1880. Examples of current applications of piezoelectric devices include ultrasonic transducers, micro-positioning devices, buzzers, strain sensors, and clocks. The invention of such lightweight, relatively inexpensive piezoceramic-fiber-composite actuators as macro fiber composite (MFC) actuators has made it possible to obtain strains and displacements greater than those that could be generated by prior actuators based on monolithic piezoceramic sheet materials. MFC actuators are flat, flexible actuators designed for bonding to structures to apply or detect strains. Bonding multiple layers of MFC actuators together could increase force capability, but not strain or displacement capability. Cylindrical piezoelectric fiber composite (CPFC) actuators have been invented as alternatives to MFC actuators for applications in which greater forces and/or strains or displacements may be required. In essence, a CPFC actuator is an MFC or other piezoceramic fiber composite actuator fabricated in a cylindrical instead of its conventional flat shape. Cylindrical is used here in the general sense, encompassing shapes that can have circular, elliptical, rectangular or other cross-sectional shapes in the planes perpendicular to their longitudinal axes.

  19. Simulation of a flap actuator for turbulence control

    NASA Astrophysics Data System (ADS)

    Mansfield, John; Kim, John

    1998-11-01

    Neural net control algorithms have been developed by our group which use spanwise shear stress at the wall as the sensory input and blowing and suction at the wall as the actuation to be controlled. These controls result in a 20% drag reduction in DNS of low Reynolds number turbulent channel flow. We have also used suboptimal control theory and systems control theory in simulations of blowing/suction control. A MEMS device which is simpler to manufacture, install, and precisely control, however, uses instead microflaps as the actuators. DNS of such fine structures would be beyond present computational capabilities. Instead we have developed a procedure using a body force to represent effects of the flaps on the flow. The method takes the surface forces that would be generated to satisfy the no-slip condition at the flap surfaces (which generally do not coincide with the computational mesh) and distributes them as a body force on the nodes of the computational mesh. Simulation results are compared with wind tunnel experimental data for the interaction of a moving flap with streamwise vortices passing over it. DNS of a fully developed turbulent flow controlled by an array of flap actuators, whose motions are activated by a neural network is currently underway. Results from this simulation will be presented.

  20. Micro lens actuator and polymer objective lens for optical pickup

    NASA Astrophysics Data System (ADS)

    Li, Pei; Pan, Longfa; Zappe, Hans

    Lens actuator is one of the most important components in an optical pickup system, which decides the performance of the disc readout system. A significant advance in technical capability has recently been achieved in the fabrication of integrated micro lens actuators of optical pickup by microelectromechanical systems (MEMS) technology. A comb-drive tracking and focusing integrated lens actuator fabricated on a silicon-on-insulator (SOI) wafer has been reported. Twodimensional tuning of the objective lens is generated by the integrated comb structures. Large displacements of about ±24.6μm in tracking direction and 5.7μm in focusing direction are demonstrated. The device has a high sensitivity and an ignorable coupling between the two dimensional driving movements. The small-form-factor device provides an excellent performance and size reduction. Furthermore, high quality polymer micro-lenses with high numerical aperture (NA) are fabricated on a pre-patterned hydrophobic glass substrate by liquid dispensing. The surface profiles are adjusted by the patterned diameter and the volume of the dispensed polymer, which is controlled by the dispensing time. This extremely low cost, high NA and easily fabricated lens represents an important step for further integration of the pickup system, thus expands the application area of optical storage.

  1. Investigation on actuation and thermo-mechanical behaviour of Shape Memory Alloy spring using hot water

    NASA Astrophysics Data System (ADS)

    Chouhan, Priya; Nath, Tameshwer; Lad, B. K.; Palani, I. A.

    2016-09-01

    In this paper, hot water is used as an actuation media for Shape memory alloy and its impact on the morphology of structure of Nitinol Shape Memory Alloy (SMA), is presented. With hot water actuation as the temperature reaches 70-80°C, spring gets fully compressed for the first few cycles followed by a displacement loss in actuation. This actuation loss is then studied with different characterization methods such as Thermo Gravimetric Analysis (TGA) and Scanning Electron Microscopy (SEM). With SEM results, it can be inferred that the energy source is not deteriorating the structure. Results observed from TGA shows high oxygen content at lower temperature limits with hot water actuation which suggest the need of conducting experiments in inert atmosphere. As a possible mechanism, a new actuation medium is introduced and various results can be seen in the paper discussed below.

  2. MEMS Adaptive Optics Devices: LDRD No. 02-1385 Summary Report

    SciTech Connect

    DAGEL, DARYL J.; ALLEN, JAMES J.

    2002-12-01

    The primary goal of this portion of the LDRD is to develop a vertical programmable diffraction grating that can be fabricated with Sandia's Ultra-planar Multi-level MEMS Technology, the SUMMiT V{trademark} process. This grating is targeted for use in a chemical detection system dubbed the Polychromator. A secondary goal is to design diffraction grating structures with additional degrees of freedom (DOF). Gratings with 2.5 microns of vertical stroke have been realized. In addition, rotational DOF grating structures have been successfully actuated, and a structure has been developed that minimizes residual stress effects.

  3. Telescoping cylindrical piezoelectric fiber composite actuator assemblies

    NASA Technical Reports Server (NTRS)

    Allison, Sidney G. (Inventor); Shams, Qamar A. (Inventor); Fox, Robert L. (Inventor); Fox, legal representative, Christopher L. (Inventor); Fox Chattin, legal representative, Melanie L. (Inventor)

    2010-01-01

    A telescoping actuator assembly includes a plurality of cylindrical actuators in a concentric arrangement. Each cylindrical actuator is at least one piezoelectric fiber composite actuator having a plurality of piezoelectric fibers extending parallel to one another and to the concentric arrangement's longitudinal axis. Each cylindrical actuator is coupled to concentrically-adjacent ones of the cylindrical actuators such that the plurality of cylindrical actuators can experience telescopic movement. An electrical energy source coupled to the cylindrical actuators applies actuation energy thereto to generate the telescopic movement.

  4. Nuclear Scans

    MedlinePlus

    Nuclear scans use radioactive substances to see structures and functions inside your body. They use a special ... images. Most scans take 20 to 45 minutes. Nuclear scans can help doctors diagnose many conditions, including ...

  5. WBC scan

    MedlinePlus

    ... in the body. It is a type of nuclear scan . How the Test is Performed Blood will ... radiation. Due to the slight radiation exposure, most nuclear scans (including WBC scan) are not recommended for ...

  6. Liver scan

    MedlinePlus

    ... Nuclear scan - technetium; Nuclear scan - liver or spleen Images Liver scan References Lidofsky S. Jaundice. In: Feldman M, ... urac.org). URAC's accreditation program is an independent audit to verify that A.D.A.M. follows ...

  7. PET scan

    MedlinePlus

    ... may have an allergic reaction to the tracer material. Some people have pain, redness, or swelling at ... with diabetes. Most PET scans are now performed along with a CT scan. This combination scan ...

  8. Degradation evaluation of microelectromechanical thermal actuators

    NASA Astrophysics Data System (ADS)

    Luo, J. K.; Fu, Y. Q.; Huang, Q. A.; Williams, J. A.; Milne, W. I.

    2008-02-01

    Metal based thermal microactuators normally have lower operation temperatures than those of Si-based ones; hence they have great potential for applications. However, metal-based thermal actuators easily suffer from degradation such as plastic deformation. In this study, planar thermal actuators were made by a single mask process using electroplated nickel as the active material, and their thermal degradation has been studied. Electrical tests show that the Ni-based thermal actuators deliver a maximum displacement of ~20 m at an average temperature of ~420 °C, much lower than that of Si-based microactuators. However, the displacement strongly depends on the frequency and peak voltage of the pulse applied. Back bending was clearly observed at a maximum temperature as low as 240 °C. Both forward and backward displacements increase with increasing the temperature up to ~450 °C, and then decreases with power. Scanning electron microscopy observation clearly showed that Ni structure deforms and reflows at power above 50mW. The compressive stress is believed to be responsible for Ni piling-up (creep), while the tensile stress upon removing the pulse current is responsible for necking at the hottest section of the device. Energy dispersive X-ray diffraction analysis revealed severe oxidation of the Ni-structure induced by Joule-heating of the current.

  9. Direct drive field actuator motors

    DOEpatents

    Grahn, A.R.

    1998-03-10

    A positive-drive field actuator motor is described which includes a stator carrying at least one field actuator which changes in dimension responsive to application of an energy field, and at least one drive shoe movable by the dimensional changes of the field actuator to contact and move a rotor element with respect to the stator. Various embodiments of the motor are disclosed, and the rotor element may be moved linearly or arcuately. 62 figs.

  10. Fault-tolerant rotary actuator

    DOEpatents

    Tesar, Delbert

    2006-10-17

    A fault-tolerant actuator module, in a single containment shell, containing two actuator subsystems that are either asymmetrically or symmetrically laid out is provided. Fault tolerance in the actuators of the present invention is achieved by the employment of dual sets of equal resources. Dual resources are integrated into single modules, with each having the external appearance and functionality of a single set of resources.

  11. Linear Proof-Mass Actuator

    NASA Technical Reports Server (NTRS)

    Holloway, Sidney E., III; Crossley, Edward A.; Miller, James B.; Jones, Irby W.; Davis, C. Calvin; Behun, Vaughn D.; Goodrich, Lewis R., Sr.

    1995-01-01

    Linear proof-mass actuator (LPMA) is friction-driven linear mass actuator capable of applying controlled force to structure in outer space to damp out oscillations. Capable of high accelerations and provides smooth, bidirectional travel of mass. Design eliminates gears and belts. LPMA strong enough to be used terrestrially where linear actuators needed to excite or damp out oscillations. High flexibility designed into LPMA by varying size of motors, mass, and length of stroke, and by modifying control software.

  12. Direct drive field actuator motors

    SciTech Connect

    Grahn, Allen R.

    1998-01-01

    A positive-drive field actuator motor including a stator carrying at least one field actuator which changes in dimension responsive to application of an energy field, and at least one drive shoe movable by the dimensional changes of the field actuator to contact and move a rotor element with respect to the stator. Various embodiments of the motor are disclosed, and the rotor element may be moved linearly or arcuately.

  13. RF MEMS Phase Shifters and their Application in Phase Array Antennas

    NASA Technical Reports Server (NTRS)

    Scardelletti, Maximilian; Ponchak, George E.; Zaman, Afroz J.; Lee, Richard Q.

    2005-01-01

    Electronically scanned arrays are required for space based radars that are capable of tracking multiple robots, rovers, or other assets simultaneously and for beam-hopping communication systems between the various assets. ^Traditionally, these phased array antennas used GaAs Monolithic Microwave Integrated Circuit (MMIC) phase shifters, power amplifiers, and low noise amplifiers to amplify and steer the beam, but the development of RF MEMS switches over the past ten years has enabled system designers to consider replacing the GaAs MMIC phase shifters with RF Micro-Electro Mechanical System (MEMS) phase shifters. In this paper, the implication of replacing the relatively high loss GaAs MMICs with low loss MEMS phase shifters is investigated.

  14. An optical scan-calibration system in scanning near-field optical microscopy

    NASA Astrophysics Data System (ADS)

    Wu, Yunliang; Zhang, Hao; Wang, Keyi

    2009-11-01

    Scanning Probe Microscopes(SPM) use piezoelectric actuators to generate the scans. But the nonlinearities inherent in the piezoelectric actuators limit the usefulness of the instruments in precision metrology. This paper describes a simple optical beam displacement sensor that is used to accurately measure the (x,y) position of a piezoelectric tube scanner used in Scanning Near-field Optical Microscope(SNOM). As the nonlinearities is too complex to make up a simple math model, this paper use the Artificial neural network to Calibrate the nonlinearities.

  15. A MEMS AlN transducer array with flexible interconnections for use as a cochlear implant

    NASA Astrophysics Data System (ADS)

    Knisely, Katherine; Zhao, Chuming; Grosh, Karl

    2015-12-01

    A completely implantable artificial organ of Corti (CIAO) was fabricated using batch MEMS processing techniques. A silicon backbone supports five piezoelectric cantilevers, each of which is designed to have an in vivo resonance corresponding to its tonotopic location in the guinea pig ST (20-40 kHz). An attachable polymer ribbon cable extends 4cm from the probe to an electrode bay, where electrical connections to each cantilever are accessed. The actuation responses of the fabricated devices were measured using laser vibrometry confirming the fluid-loaded resonance conforming to the straight section of the first turn of the guinea pig cochlea. First generation devices have been fabricated and the actuated resonances were measured to range from 80.3-134.2kHz in air and 24.3-41.0 kHz in water.

  16. RF MEMS Switches with SiC Microbridges for Improved Reliability

    NASA Technical Reports Server (NTRS)

    Scardelletti, Maximilian C.; Zorman, Christian A.; Oldham, Daniel R.

    2008-01-01

    Radio frequency (RF) microelectromechanical (MEMS) switches offer superior performance when compared to the traditional semiconductor devices such as PIN diodes or GaAs transistors. MEMS switches have a return loss (RL) better than -25 dB, negligible insertion loss (IL), isolation better than -30 dB, and near zero power consumption. However, RF MEMS switches have several drawbacks the most serious being long-term reliability. The ability for the switch to operate for millions or even billions of cycles is a major concern and must be addressed. MEMS switches are basically grouped in two categories, capacitive and metal-to-metal contact. The capacitive type switch consists of a movable metal bridge spanning a fixed electrode and separated by a narrow air gap and thin insulating material. The metal-to-metal contact type utilizes the same basic design but without the insulating material. After prolonged operation the metal bridges, in most of these switches, begin to sag and eventually fail to actuate. For the metal-to-metal type, the two metal layers may actually fuse together. Also if the switches are not packaged properly or protected from the environment moisture may build up and cause stiction between the top and bottom electrodes rendering them useless. Many MEMS switch designs have been developed and most illustrate fairly good RF characteristics. Nevertheless very few have demonstrated both great RF performance and ability to perform millions/billions of switching cycles. Of these, nearly all are of metal-to-metal type so as the frequency increases RF performance decreases.

  17. Lead screw linear actuator

    NASA Technical Reports Server (NTRS)

    Perkins, Gerald S. (Inventor)

    1980-01-01

    A linear actuator which can apply high forces is described, which includes a reciprocating rod having a threaded portion engaged by a nut that is directly coupled to the rotor of an electric motor. The nut is connected to the rotor in a manner that minimizes loading on the rotor, by the use of a coupling that transmits torque to the nut but permits it to shift axially and radially with respect to the rotor. The nut has a threaded hydrostatic bearing for engaging the threaded rod portion, with an oilcarrying groove in the nut being interrupted.

  18. Piezoelectric actuated gimbal

    DOEpatents

    Tschaggeny, Charles W.; Jones, Warren F.; Bamberg, Eberhard

    2011-09-13

    A gimbal is described and which includes a fixed base member defining an axis of rotation; a second member concentrically oriented relative to the axis of rotation; a linear actuator oriented in immediate, adjoining force transmitting relation relative to the base member or to the second member, and which applies force along a linear axis which is tangential to the axis of rotation so as to cause the second member to rotate coaxially relative to the fixed base member; and an object of interest mounted to the second member such that the object of interest is selectively moved relative to the base member about the axis of rotation.

  19. Comparison of IC and MEMS packaging reliability approaches

    NASA Technical Reports Server (NTRS)

    Ghaffarian, R.

    2000-01-01

    This paper reviews the current status of IC and MEMS packaging technology with emphasis on reliability, compares the norm for IC packaging reliability evaluation and identifies challenges for development of reliability methodologies for MEMS, and finally, proposes the use of COTS MEMS in order to start generating statistically meaningful reliability data as a vehicle for future standardization of reliability test methodology for MEMS packaging.

  20. A study on the effect of surface topography on the actuation performance of stacked-rolled dielectric electro active polymer actuator

    NASA Astrophysics Data System (ADS)

    Sait, Usha; Muthuswamy, Sreekumar

    2016-05-01

    Dielectric electro active polymer (DEAP) is a suitable actuator material that finds wide applications in the field of robotics and medical areas. This material is highly controllable, flexible, and capable of developing large strain. The influence of geometrical behavior becomes critical when the material is used as miniaturized actuation devices in robotic applications. The present work focuses on the effect of surface topography on the performance of flat (single sheet) and stacked-rolled DEAP actuators. The non-active areas in the form of elliptical spots that affect the performance of the actuator are identified using scanning electron microscope (SEM) and energy dissipated X-ray (EDX) experiments. Performance of DEAP actuation is critically evaluated, compared, and presented with analytical and experimental results.

  1. Development of MEMS photoacoustic spectroscopy

    SciTech Connect

    Robinson, Alex Lockwood; Eichenfield, Matthew S.; Griffin, Benjamin; Harvey, Heidi Alyssa; Nielson, Gregory N.; Okandan, Murat; Langlois, Eric; Resnick, Paul James; Shaw, Michael J.; Young, Ian; Givler, Richard C.; Reinke, Charles M.

    2014-01-01

    After years in the field, many materials suffer degradation, off-gassing, and chemical changes causing build-up of measurable chemical atmospheres. Stand-alone embedded chemical sensors are typically limited in specificity, require electrical lines, and/or calibration drift makes data reliability questionable. Along with size, these "Achilles' heels" have prevented incorporation of gas sensing into sealed, hazardous locations which would highly benefit from in-situ analysis. We report on development of an all-optical, mid-IR, fiber-optic based MEMS Photoacoustic Spectroscopy solution to address these limitations. Concurrent modeling and computational simulation are used to guide hardware design and implementation.

  2. Mechanical and electrochemical properties of an IPMC actuator with palladium electrodes in acid and alkaline solutions

    NASA Astrophysics Data System (ADS)

    Aoyagi, Wataru; Omiya, Masaki

    2013-05-01

    An ionic polymer-metal composite (IPMC) actuator, which consists of a thin perfluorinated ionomer membrane and electrodes plated on both surfaces, undergoes a large bending motion when a low electric field is applied across its thickness. IPMC actuators are lightweight and soft and can operate in solutions. They are thus promising for a wide range of applications including MEMS sensors, artificial muscles, biomimetic systems, and medical devices. The deformation behavior of IPMC actuators depends on the pH of the working solution. However, their basic mechanism is not well understood. Therefore, this study investigates the deformation mechanism of an IPMC actuator with palladium electrodes in various pH solutions. The tip displacements of IPMC actuators were measured under a step voltage in various pH solutions. Cyclic voltammetry (CV) and alternating-current (AC) impedance measurements were then performed to investigate the effects of pH on the electrochemical properties of IPMC actuators. The responses to a step voltage indicate that the deformation behavior of an IPMC actuator depends on the pH: a lower pH gives a larger maximum tip displacement and more pronounced relaxation. In CV measurements, a lower pH results in more active reduction on the palladium electrode. In AC impedance measurements, a lower pH leads to a greater charge transfer resistance and a smaller double layer capacitance in an acid solution. Based on these mechanical and electrochemical measurements, we conclude that the maximum tip displacement and relaxation are governed by reduction on the palladium electrode and that the residual tip displacement is related to the charge transfer resistance and the double layer capacitance. These results are helpful for the use and control of IPMC actuators.

  3. Micro electromechanical systems (MEMS) for mechanical engineers

    SciTech Connect

    Lee, A. P., LLNL

    1996-11-18

    The ongoing advances in Microelectromechanical Systems (MEMS) are providing man-kind the freedom to travel to dimensional spaces never before conceivable. Advances include new fabrication processes, new materials, tailored modeling tools, new fabrication machines, systems integration, and more detailed studies of physics and surface chemistry as applied to the micro scale. In the ten years since its inauguration, MEMS technology is penetrating industries of automobile, healthcare, biotechnology, sports/entertainment, measurement systems, data storage, photonics/optics, computer, aerospace, precision instruments/robotics, and environment monitoring. It is projected that by the turn of the century, MEMS will impact every individual in the industrial world, totaling sales up to $14 billion (source: System Planning Corp.). MEMS programs in major universities have spawned up all over the United States, preparing the brain-power and expertise for the next wave of MEMS breakthroughs. It should be pointed out that although MEMS has been initiated by electrical engineering researchers through the involvement of IC fabrication techniques, today it has evolved such that it requires a totally multi-disciplinary team to develop useful devices. Mechanical engineers are especially crucial to the success of MEMS development, since 90% of the physical realm involved is mechanical. Mechanical engineers are needed for the design of MEMS, the analysis of the mechanical system, the design of testing apparatus, the implementation of analytical tools, and the packaging process. Every single aspect of mechanical engineering is being utilized in the MEMS field today, however, the impact could be more substantial if more mechanical engineers are involved in the systems level designing. In this paper, an attempt is made to create the pathways for a mechanical engineer to enter in the MEMS field. Examples of application in optics and medical devices will be used to illustrate how mechanical

  4. Actuator operated microvalves

    NASA Technical Reports Server (NTRS)

    Okojie, Robert S. (Inventor)

    2008-01-01

    An actuator operated microvalve and the method of making same is disclosed and claimed. The microvalve comprises a SiC housing which includes a first lower portion and a second upper portion. The lower portion of the SiC housing includes a passageway therethrough, a microvalve seat, and a moveable SiC diaphragm. The SiC diaphragm includes a centrally located boss and radially extending corrugations which may be sinusoidally shaped. The boss of the SiC diaphragm moves and modulates in a range of positions between a closed position wherein the boss interengages said microvalve seat prohibiting communication of fluid through the passageway and a fully open position when the boss is spaced apart from the seat at its maximum permitting communication of fluid through said passageway. The actuator includes a SiC top plate affixed to the boss of the diaphragm and a first electrode and the second upper portion of the SiC housing further includes a second electrode.

  5. Motor actuated vacuum door

    NASA Astrophysics Data System (ADS)

    Hanagud, A. V.

    1986-10-01

    Doors that allow scientific instruments to record and retrieve the observed data are often required to be designed and installed as a part of sounding rocket hardware. The motor-actuated vacuum door was designed to maintain a medium vacuum of the order of 0.0001 torr or better while closed, and to provide an opening 15 inches long x 8.5 inches wide while open for cameras to image Halley's comet. When the electric motor receives the instruction to open the door through the payload battery, timer, and relay circuit, the first operation is to unlock the door. After unlatching, the torque transmitted by the motor to the main shaft through the links opens the door. A microswitch actuator, which rides on the linear motion conversion mechanism, is adjusted to trip the limit switch at the end of the travel. The process is repeated in the reverse order to close the door. 'O' rings are designed to maintain the seal. Door mechanisms similar to the one described have flown on Aerobee 17.018 and Black Brant 27.047 payloads.

  6. Bi-stable optical actuator

    DOEpatents

    Holdener, Fred R.; Boyd, Robert D.

    2000-01-01

    The present invention is a bi-stable optical actuator device that is depowered in both stable positions. A bearing is used to transfer motion and smoothly transition from one state to another. The optical actuator device may be maintained in a stable position either by gravity or a restraining device.

  7. Remotely-actuated biomedical switch

    NASA Technical Reports Server (NTRS)

    Lee, R. D.

    1969-01-01

    Remotely-actuated biomedical switching circuit using transistors consumes no power in the off position and can be actuated by a single-frequency telemetry pulse to control implanted instrumentation. Silicon controlled rectifiers permit the circuit design which imposes zero drain on supply batteries when not in use.

  8. Combined polarizing interferometer and optical beam deflection system for MEMS characterization

    NASA Astrophysics Data System (ADS)

    Jenkins, David F. L.; Clegg, Warwick W.; Liu, Xinqun; Tunstall, Glen; Cattan, Eric; Remiens, Denis; Liu, B.

    2001-12-01

    A potential application for ferroelectric thin films is micro positioning and actuation, as in MEMS devices. The amount of actuation possible is determined by a number of factors: the piezoelectric coefficient d31, geometric factors and the compliance of both the actuator and cantilever and the electric field across the film. It is important for their realization as devices in applications that these micro-actuators are characterized. One such means is to use optical beam deflection (OBD). However, whilst extremely simple to implement, optical beam deflection does not provide an absolute measure of displacement. For absolute displacement measurement, with directional determination, a dual-beam normal incidence polarization interferometer is required. Based upon an interferometer developed in our laboratory to measure the flying height or head-disk spacing in a hard disk drive, an optical system is proposed which enables both an OBD and a polarization interferometer to be combined in one compact system. Details of both systems and are presented and the combined system described.

  9. Actuated Hybrid Mirror Telescope

    NASA Technical Reports Server (NTRS)

    Hickey, Gregory; Redding, David; Lowman, Andrew; Cohen, David; Ohara, Catherine

    2005-01-01

    The figure depicts the planned Actuated Hybrid Mirror Telescope (AHMT), which is intended to demonstrate a new approach to the design and construction of wide-aperture spaceborne telescopes for astronomy and Earth science. This technology is also appropriate for Earth-based telescopes. The new approach can be broadly summarized as using advanced lightweight mirrors that can be manufactured rapidly at relatively low cost. More specifically, it is planned to use precise replicated metallic nanolaminate mirrors to obtain the required high-quality optical finishes. Lightweight, dimensionally stable silicon carbide (SiC) structures will support the nanolaminate mirrors in the required surface figures. To enable diffraction- limited telescope performance, errors in surface figures will be corrected by use of mirror-shape-control actuators that will be energized, as needed, by a wave-front-sensing and control system. The concepts of nanolaminate materials and mirrors made from nanolaminate materials were discussed in several previous NASA Tech Briefs articles. Nanolaminates constitute a relatively new class of materials that can approach theoretical limits of stiffness and strength. Nanolaminate mirrors are synthesized by magnetron sputter deposition of metallic alloys and/or compounds on optically precise master surfaces to obtain optical-quality reflector surfaces backed by thin shell structures. As an integral part of the deposition process, a layer of gold that will constitute the reflective surface layer is deposited first, eliminating the need for a subsequent and separate reflective-coating process. The crystallographic textures of the nanolaminate will be controlled to optimize the performance of the mirror. The entire deposition process for making a nanolaminate mirror takes less than 100 hours, regardless of the mirror diameter. Each nanolaminate mirror will be bonded to its lightweight SiC supporting structure. The lightweight nanolaminate mirrors and Si

  10. MEMS Technology for Space Applications

    NASA Technical Reports Server (NTRS)

    vandenBerg, A.; Spiering, V. L.; Lammerink, T. S. J.; Elwenspoek, M.; Bergveld, P.

    1995-01-01

    Micro-technology enables the manufacturing of all kinds of components for miniature systems or micro-systems, such as sensors, pumps, valves, and channels. The integration of these components into a micro-electro-mechanical system (MEMS) drastically decreases the total system volume and mass. These properties, combined with the increasing need for monitoring and control of small flows in (bio)chemical experiments, makes MEMS attractive for space applications. The level of integration and applied technology depends on the product demands and the market. The ultimate integration is process integration, which results in a one-chip system. An example of process integration is a dosing system of pump, flow sensor, micromixer, and hybrid feedback electronics to regulate the flow. However, for many applications, a hybrid integration of components is sufficient and offers the advantages of design flexibility and even the exchange of components in the case of a modular set up. Currently, we are working on hybrid integration of all kinds of sensors (physical and chemical) and flow system modules towards a modular system; the micro total analysis system (micro TAS). The substrate contains electrical connections as in a printed circuit board (PCB) as well as fluid channels for a circuit channel board (CCB) which, when integrated, form a mixed circuit board (MCB).

  11. Nondestructive optical characterization of MEMS

    NASA Astrophysics Data System (ADS)

    Pryputniewicz, Ryszard J.

    2013-10-01

    Advances in emerging technology of microelectromechanical systems (MEMS) are one of the most challenging tasks in today's experimental mechanics. More specifically, development of these miniature devices requires sophisticated design, analysis, fabrication, testing, and characterization tools that have multiphysics and multiscale capabilities, especially as MEMS are being developed for use at harsh conditions. In harsh-environment and high-performance guidance applications inertial sensors must be sensitive to low rates of rotation yet survive the high blast loads associated with the initial launch. In this multi-year study a set of tuning fork gyroscopes (TFGs) were subjected to a series of increasing g-loads (culminating at approximately 60,000 g's) with measurements of shape made after each test. High-g-testing was conducted within the large test chamber using a custom fabricated mini powder gun. A custom set of test sample packages were hermetically sealed with glass lids to allow optical inspection of components while preserving the operating (vacuum) environment. Optical and interferometric measurements have been made prior to and after each shock g-loading. The shape of the TFG test articles was measured using optoelectronic laser interferometric microscope (OELIM) methodology. Line traces were extracted from pertinent structures to clearly examine changes in the TFG. Failure of the die was observed in the form of fractures below the chip surface as well as fractures in the glass lid sealing the package.

  12. MEMS Based Micro Aerial Vehicles

    NASA Astrophysics Data System (ADS)

    Joshi, Niranjan; Köhler, Elof; Enoksson, Peter

    2016-10-01

    Designing a flapping wing insect robot requires understanding of insect flight mechanisms, wing kinematics and aerodynamic forces. These subsystems are interconnected and their dependence on one another affects the overall performance. Additionally it requires an artificial muscle like actuator and transmission to power the wings. Several kinds of actuators and mechanisms are candidates for this application with their own strengths and weaknesses. This article provides an overview of the insect scaled flight mechanism along with discussion of various methods to achieve the Micro Aerial Vehicle (MAV) flight. Ongoing projects in Chalmers is aimed at developing a low cost and low manufacturing time MAV. The MAV design considerations and design specifications are mentioned. The wings are manufactured using 3D printed carbon fiber and are under experimental study.

  13. Rise time reduction of thermal actuators operated in air and water through optimized pre-shaped open-loop driving

    NASA Astrophysics Data System (ADS)

    Larsen, T.; Doll, J. C.; Loizeau, F.; Hosseini, N.; Peng, A. W.; Fantner, G. E.; Ricci, A. J.; Pruitt, B. L.

    2017-04-01

    Electrothermal actuators have many advantages compared to other actuators used in micro-electro-mechanical systems (MEMS). They are simple to design, easy to fabricate and provide large displacements at low voltages. Low voltages enable less stringent passivation requirements for operation in liquid. Despite these advantages, thermal actuation is typically limited to a few kHz bandwidth when using step inputs due to its intrinsic thermal time constant. However, the use of pre-shaped input signals offers a route for reducing the rise time of these actuators by orders of magnitude. We started with an electrothermally actuated cantilever having an initial 10–90% rise time of 85 μs in air and 234 μs in water for a standard open-loop step input. We experimentally characterized the linearity and frequency response of the cantilever when operated in air and water, allowing us to obtain transfer functions for the two cases. We used these transfer functions, along with functions describing desired reduced rise-time system responses, to numerically simulate the required input signals. Using these pre-shaped input signals, we improved the open-loop 10–90% rise time from 85 μs to 3 μs in air and from 234 μs to 5 μs in water, an improvement by a factor of 28 and 47, respectively. Using this simple control strategy for MEMS electrothermal actuators makes them an attractive alternative to other high speed micromechanical actuators such as piezoelectric stacks or electrostatic comb structures which are more complex to design, fabricate, or operate.

  14. Theoretical and experimental research on the influence of multiple piezoelectric effects on physical parameters of piezoelectric actuator

    NASA Astrophysics Data System (ADS)

    Shi, Liping; Zhou, Haimin; Huang, Jie; Tan, Jiliang

    2015-04-01

    Compared with the traditional actuator of machinery and electricity, the piezoelectric actuator has the advantages of a compact structure, small volume, no mechanical friction, athermancy and no electromagnetic interference. Therefore, it has high application value in the fields of MEMS, bioengineering, medical science and so on. This article draws conclusions from the influence of multiple piezoelectric effects on the physical parameters (dielectric coefficient, equivalent capacity, energy conversion and piezoelectric coefficient) of piezoelectric actuators. These data from theoretical and experimental research show the following: (1) The rate between the dielectric coefficient of piezoelectric in mechanical freedom and clamping is obtained from the secondary direct piezoelectric effect, which enhances the dielectric property, increases the dielectric coefficient and decreases the coefficient of dielectric isolation; (2) Under external field, En ( ex ) = E 1 , exterior stress T = 0, that is to say, under the boundary condition of mechanical freedom, piezoelectric can store electric energy and elasticity, which obtains power density, elastic density and an electromechanical coupling factor; (3) According to the piezoelectric strain Si ( 1 ) , piezoelectric displacement Dm ( 2 ) and piezoelectric strain Si ( 3 ) of multiple piezoelectric effects, when the dielectric coefficient of the first converse piezoelectric effect ɛ33 is 1326 and the dielectric coefficient of the secondary direct piezoelectric effect increases to 3336, the dielectric coefficient of the ceramic chip increases. When the piezoelectric coefficient of the first converse piezoelectric effect d33 is 595 and the piezoelectric coefficient of the secondary direct piezoelectric effect decreases to 240, the piezoelectric coefficient of the ceramic chip will decrease. It is of major significance both in the applications and in basic theory to research the influence of multiple piezoelectric effects on the

  15. Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry.

    PubMed

    Merlo, Sabina; Poma, Paolo; Crisà, Eleonora; Faralli, Dino; Soldo, Marco

    2017-02-25

    In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time.

  16. A Novel MUMPs-compatible single-layer out-of-plane electrothermal actuator

    NASA Astrophysics Data System (ADS)

    Tang, Weider; Wu, Mingching; Ho, Yi-Ping; Yeh, Mau-Shium; Fang, Weileun

    2002-11-01

    Microactuator is one of the key components for the microelectromechanical systems (MEMS), and it can be categorized as out-of-plane and in-plane according to the motion types. Most of the existing out-of-plane thermal actuators are multi-layer structures. In this paper, a novel electrothermal single-layer out-of-plane actuator is provided and it characteristics and advantages of this device are stated as follows: (1) This actuator is consisted of only a single thin film material, therefore, it can prevent from delaminating after a long-term operation. Besides, owing to its symmetric geometric design, the inner-beams of this structure don"t have any current passed through them and the inner-beams also provide a geometric constraint to allow the two free ends of the structure to bend upwards symmetrically. (2) This device can be operated at a relative low voltage (<5 volt), and deflected upwards about 4 μm in the experiment test. Besides, the fabrication process is very simple and it is MUMPs(Multi-User MEMS Processes)-compatible. Presently, a prototype structure has been successfully fabricated and tested. This structure offers the potential applications in the adaptive optics systems, and Fabry-Perot filters, etc. Besides, it also provides an interface to cooperate with integrated circuits (IC) and various optical elements to construct an embedded-control optical system.

  17. Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

    PubMed Central

    Merlo, Sabina; Poma, Paolo; Crisà, Eleonora; Faralli, Dino; Soldo, Marco

    2017-01-01

    In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time. PMID:28245603

  18. Automotive MEMS sensors based on additive technologies

    NASA Astrophysics Data System (ADS)

    Vasiliev, A. A.; Sokolov, A. V.; Pisliakov, A. V.; Oblov, K. Yu; Samotaev, N. N.; Kim, V. P.; Tkachev, S. V.; Gubin, S. P.; Potapov, G. N.; Kokhtina, Yu V.; Nisan, A. V.

    2016-10-01

    The application of MEMS devices is one of the recent trends in sensor technology. However, traditional silicon MEMS have some intrinsic limitations, when applied to the monitoring of high temperature/high humidity processes. Thin ceramic films of alumina, zirconia or LTCC fixed on rigid frame made of the same ceramic material in combination with ink and aerosol jet printing of functional materials (heaters, temperature, pressure, gas sensitive elements) provides a cheap, flexible, and high-performance alternative for silicon MEMS devices used as gas sensors, gas flowmeters, lambda probes, bolometric matrices for automotive and general application.

  19. T-Slide Linear Actuators

    NASA Technical Reports Server (NTRS)

    Vranish, John

    2009-01-01

    T-slide linear actuators use gear bearing differential epicyclical transmissions (GBDETs) to directly drive a linear rack, which, in turn, performs the actuation. Conventional systems use a rotary power source in conjunction with a nut and screw to provide linear motion. Non-back-drive properties of GBDETs make the new actuator more direct and simpler. Versions of this approach will serve as a long-stroke, ultra-precision, position actuator for NASA science instruments, and as a rugged, linear actuator for NASA deployment duties. The T slide can operate effectively in the presence of side forces and torques. Versions of the actuator can perform ultra-precision positioning. A basic T-slide actuator is a long-stroke, rack-and-pinion linear actuator that, typically, consists of a T-slide, several idlers, a transmission to drive the slide (powered by an electric motor) and a housing that holds the entire assembly. The actuator is driven by gear action on its top surface, and is guided and constrained by gear-bearing idlers on its other two parallel surfaces. The geometry, implemented with gear-bearing technology, is particularly effective. An electronic motor operating through a GBDET can directly drive the T slide against large loads, as a rack and pinion linear actuator, with no break and no danger of back driving. The actuator drives the slide into position and stops. The slide holes position with power off and no brake, regardless of load. With the T slide configuration, this GBDET has an entire T-gear surface on which to operate. The GB idlers coupling the other two T slide parallel surfaces to their housing counterpart surfaces provide constraints in five degrees-of-freedom and rolling friction in the direction of actuation. Multiple GB idlers provide roller bearing strength sufficient to support efficient, rolling friction movement, even in the presence of large, resisting forces. T-slide actuators can be controlled using the combination of an off

  20. MEMS- and NEMS-based complex adaptive smart devices and systems

    NASA Astrophysics Data System (ADS)

    Varadan, Vijay K.

    2001-10-01

    The microelectronics industry has seen explosive growth during the last thirty years. Extremely large markets for logic and memory devices have driven the development of new materials, and technologies for the fabrication of even more complex devices with feature sizes now down at the sub micron and nanometer level. Recent interest has arisen in employing these materials, tools and technologies for the fabrication of miniature sensors and actuators and their integration with electronic circuits to produce smart devices and systems. This effort offers the promise of: 1) increasing the performance and manufacturability of both sensors and actuators by exploiting new batch fabrication processes developed including micro stereo lithographic and micro molding techniques; 2) developing novel classes of materials and mechanical structures not possible previously, such as diamond like carbon, silicon carbide and carbon nanotubes, micro-turbines and micro-engines; 3) development of technologies for the system level and wafer level integration of micro components at the nanometer precision, such as self-assembly techniques and robotic manipulation; 4) development of control and communication systems for MEMS devices, such as optical and RF wireless, and power delivery systems, etc. A novel composite structure can be tailored by functionalizing carbon nanotubes and chemically bonding them with the polymer matrix e.g. block or graft copolymer, or even cross-linked copolymer, to impart exceptional structural, electronic and surface properties. Bio- and mechanical-MEMS devices derived from this hybrid composite provide a new avenue for future smart systems.

  1. Three-dimensional polymer MEMS with functionalized carbon nanotubes by microstereolithography

    NASA Astrophysics Data System (ADS)

    Varadan, Vijay K.; Xie, Jining

    2003-04-01

    Microfabrication techniques such as bulk micromachining and surface micromachining currently employed to conceive MEMS are largely derived from the standard IC and microelectronics technology. Even though many MEMS devices with integrated electronics have been achieved by using the traditional micromachining techniques, some limitations have nevertheless to be underlined: 1) these techniques are very expensive and need specific installations as well as a cleanroom environment, 2) the materials that can be used up to now are restricted to silicon and metals, 3) the manufacture of 3D parts having curved surfaces or an important number of layers is not possible. Moreover, for some biological applications, the materials used for sensors must be compatible with human body and the actuators need to have high strain and displacement which the current silicon based MEMS do not provide. It is thus natural for the researchers to look for alternative methods such as Microstereolithography (MSL) to make 3D sensors and actuators using polymeric based materials. For MSL techniques to be successful as their silicon counterparts, one has to come up with multifunctional polymers with electrical properties comparable to silicon. These multifunctional polymers should not only have a high sensing capability but also a high strain and actuation performance. A novel UV-curable polymer uniformly bonded with functionalised nanotubes was synthesized via a modified three-step in-situ polymerization. Purified multi-walled nanotubes, gained from the microwave chemical vapor deposition method, were functionalised by oxidation. The UV curable polymer was prepared from toluene diisocyantae (TDI), functionalised nanotubes, and 2-hydroxyethyl methacrylate (HEMA). The chemical bonds between -NCO groups of TDI and -OH, -COOH groups of functionalised nanotubes help for conceiving polymeric based MEMS devices. A cost effective fabrication techniques was presented using Micro Stereo Lithography and an

  2. Three-dimensional polymer MEMS with functionalized carbon nanotubes by microstereolithography

    NASA Astrophysics Data System (ADS)

    Varadan, Vijay K.; Xie, Jining

    2003-01-01

    Microfabrication techniques such as bulk micromachining and surface micromachining currently employed to conceive MEMS are largely derived from the standard IC and microelectronics technology. Even though many MEMS devices with integrated electronics have been achieved by using the traditional micromachining techniques, some limitations have nevertheless to be underlined: 1) these techniques are very expensive and need specific installations as well as a cleanroom environment, 2) the materials that can be used up to now are restricted to silicon and metals, 3) the manufacture of 3D parts having curved surfaces or an important number of layers is not possible. Moreover, for some biological applications, the materials used for sensors must be compatible with human body and the actuators need to have high strain and displacement which the current silicon based MEMS do not provide. It is thus natural for the researchers to look for alternative methods such as Microstereolithography (MSL) to make 3D sensors and actuators using polymeric based materials. For MSL techniques to be successful as their silicon counterparts, one has to come up with multifunctional polymers with electrical properties comparable to silicon. These multifunctional polymers should not only have a high sensing capability but also a high strain and actuation performance. A novel UV-curable polymer uniformly bonded with functionalized nanotubes was synthesized via a modified three-step in-situ polymerization. Purified multi-walled nanotubes, gained from the microwave chemical vapor deposition method, were functionalized by oxidation. The UV curable polymer was prepared from toluene diisocyanate (TDI), functionalized nanotubes, and 2 hydroxyethyl methacrylate (HEMA). The chemical bonds between NCO groups of TDI and OH, COOH groups of functionalized nanotubes help for conceiving polymeric based MEMS devices. A cost effective fabrication techniques was presented using Micro Stereo Lithography and an

  3. Nuclear radiation actuated valve

    DOEpatents

    Christiansen, David W.; Schively, Dixon P.

    1985-01-01

    A nuclear radiation actuated valve for a nuclear reactor. The valve has a valve first part (such as a valve rod with piston) and a valve second part (such as a valve tube surrounding the valve rod, with the valve tube having side slots surrounding the piston). Both valve parts have known nuclear radiation swelling characteristics. The valve's first part is positioned to receive nuclear radiation from the nuclear reactor's fuel region. The valve's second part is positioned so that its nuclear radiation induced swelling is different from that of the valve's first part. The valve's second part also is positioned so that the valve's first and second parts create a valve orifice which changes in size due to the different nuclear radiation caused swelling of the valve's first part compared to the valve's second part. The valve may be used in a nuclear reactor's core coolant system.

  4. Application Actuation Trade Study

    DTIC Science & Technology

    1982-01-01

    Rectifier Unit 3 1..5 37.5 Battery 40 A-Hr 1 76 75 Battery Charger 1 6.8 6.8 Static Inverter I 12.C 13.C AC Power Pelay 3 PDT 1 1.2 1.2 AC Povmr Relay 3 PD)T...Weight 0.7 pounds Total Weight 4.7 pounds Both actuators are Vowered by 28V DC brush type motors so that the system can be operated from battery pover in... DC -AC Inverter 2 34 68 Battery (2 @ 4C A-Hr) 2 75 150 AC Power Contactor 6POT 2 18 36 AC Power Contactor 6PST 2 12 24 AC Power Contactor SPST 4 1

  5. Surface science, MEMS and NEMS: Progress and opportunities for surface science research performed on, or by, microdevices

    NASA Astrophysics Data System (ADS)

    Berman, D.; Krim, J.

    2013-05-01

    Micro- and Nano-Electro-Mechanical Systems (MEMS and NEMS) represent existing (MEMS) and emerging (NEMS) technologies based on microfabrication of micron to nanometer scale miniature mechanical components (gears, latches, mirrors, etc.) that are integrated with electrical elements to allow for electro-mechanical actuation and/or capacitive displacement detection. One common aspect of MEMS and NEMS devices is that they have mechanical functionality that may include moveable parts whose motion is controlled by external electrical connections. Current fabrication methods, along with high surface to volume ratios, make MEMS and NEMS devices highly susceptible to surface forces and adsorbed surface species, to the point where the devices are now being increasingly utilized as sensitive probes in fundamental surface science studies. This sensitivity can potentially be used to great advantage if the devices can be made to operate reproducibly in well controlled environments. This review highlights a number of such recent studies, beginning with an overview of the fabrication processes employed for silicon, metal, diamond, graphene and carbon nanotube - based device technologies. A discussion of how traditional surface science studies on passive two-dimensional substrates compare to and contrast with studies performed on, or by, MEMS and/or NEMS devices, is also included. The overall goal is to highlight areas of current opportunity for surface scientists in the flourishing arena of micro- and nano-device fabrication and technology. UV ozone cleaning and oxygen plasma exposure are both effective for FOTAS removal from the open regions of silicon MEMS. UV ozone does not penetrate inside occluded regions. For the occluded areas the oxygen plasma is effective in FOTAS removal, thus leaving FOTAS only in the regions of extremely high aspect ratio.

  6. Computer-aided design comparisons of monolithic and hybrid MEM-tunable VCSELs

    NASA Astrophysics Data System (ADS)

    Ochoa, Edward M.; Nelson, Thomas R., Jr.; Blum-Spahn, Olga; Lott, James A.

    2003-07-01

    We report and use our micro-electro-mechanically tunable vertical cavity surface emitting laser (MEM-TVCSEL) computer-aided design methodology to investigate the resonant frequency design space for monolithic and hybrid MEM-TVCSELs. For various initial optical air gap thickness, we examine the sensitivity of monolithic or hybrid MEM-TVCSEL resonant frequency by simulating zero, two, and four percent variations in III-V material growth thickness. As expected, as initial optical airgap increases, tuning range decreases due to less coupling between the active region and the tuning mirror. However, each design has different resonant frequency sensitivity to variations in III-V growth parameters. In particular, since the monolithic design is comprised of III-V material, the shift in all growth thicknesses significantly shifts the resonant frequency response. However, for hybrid MEMTVCSELs, less shift results, since the lower reflector is an Au mirror with reflectivity independent of III-V growth variations. Finally, since the hybrid design is comprised of a MUMPS polysilicon mechanical actuator, pull-in voltage remains independent of the initial optical airgap between the tuning reflector and the III-V material. Conversely, as the initial airgap increases in the monolithic design, the pull-in voltage significantly increases.

  7. Piezoelectric MEMS resonators based on ultrathin epitaxial GaN heterostructures on Si

    NASA Astrophysics Data System (ADS)

    Leclaire, P.; Frayssinet, E.; Morelle, C.; Cordier, Y.; Théron, D.; Faucher, M.

    2016-10-01

    We present the first results for microelectromechanical (MEMS) resonators fabricated on epitaxial nitride semiconductors with thin buffers engineered for MEMS and NEMS applications. These results are used to assess the use of thin buffers for GaN MEMS fabrication. On a 700 nm thick AlGaN/GaN epilayer, a high tensile stress is observed to increase the resonant frequency. The electromechanical coupling efficiencies of integrated transducers are assessed and compared with previously obtained results on commercially available 2 µm thick epilayers used for power transistor applications. A 28 nm V-1 actuation efficiency is measured on the 700 nm thick structure which is slightly better than the one measured on the 2 µm buffer. The electrical response of a gateless detector designed as a piezoresistance is obtained and a gauge factor of 60 is estimated. These results show that material issues can be unlocked to exploit the potentialities of III-nitrides for NEMS applications.

  8. Development of a wavelength tunable filter using MEMS technology

    NASA Astrophysics Data System (ADS)

    Liu, Junting

    Microelectromechanical systems (MEMS) for optical applications have received intensive attention in recent years because of their potential applications in optical telecommunication. Traditional wavelength division multiplexing (WDM) offers high capacity but requires the fabrication of selective add-drop filters. MEMS technology offers an effective way to fabricate these components at low cost. This thesis presents the development of a device that tunes the Bragg wavelength by coupling into the evanescent field of the grating. A Bragg grating is a periodic perturbation of the refractive index along a fiber or a periodic perturbation of the structure of a planar waveguide. The Bragg wavelength can be tuned by changing the degree to which a dielectric slab couples into the evanescent field. The result is a change in the effective index of the grating, and thus a change in the wavelength that which it reflects. In this thesis Bragg gratings were successfully written into an optical fiber using phase mask technique. Mechanical polishing was used to side-polish the fiber and remove cladding to expose the core. Grating structures were also fabricated in planar waveguide using E-beam writing and dry etching. In order to achieve the smoothest possible morphology of the waveguide, plasma dry etching of transparent substrates was studied in great detail. It is found that the pre-etch cleaning procedure greatly influences the ability to obtain a smooth etched surface. Upper limits of evanescent field tuning were investigated by applying different index liquids such as D. I. water and index matching oils or by positioning different dielectric materials such as glass and silicon close to the grating. Planar waveguides were found to be more sensitive to effective index change. Two kinds of computer simulation were carried out to understand the mode profile and to estimate the value of effective index of planar waveguide under "dry" and "wet" conditions. The first one used an

  9. Materials issues in the integration of magnetic structures on CMOS-MEMS

    NASA Astrophysics Data System (ADS)

    Min, Seungook

    A MEMS-based data storage is being developed at CMU for low power, high access speed and low cost. Multi magnetic heads and their actuators are proposed to be fabricated on top of CMOS and to be released with proper masking. We describe the development of a magnetic head process integrated with a CMOS-MEMS process for actuator fabrication. Process integration depends on an understanding of the structure-process-properties relationship of many different processes. Several materials problems were encountered and solved in the course of the process development. The experiment work and rationale for particular choices is discussed. Low stress (<25 MPa), magnetically soft films of permalloy (Ni 80Fe20) were deposited for a MEMS-based data storage application without significant plasma-induced substrate heating. Optimization of film properties was performed using a designed experiment, response surface methodology. The relationship between the results of the factorial experiment is explained based on Murayama's stripe domain theory. The properties of AMR sensors fabricated on structures released by the CMOS post process are characterized. The AMR sensor on the released MEMS structure functions properly and the MR head shows 0.4% MR change. According to our analysis of the required MR properties and its specification, the characteristics of TMR sensor, high intensity signal and low power consumption, well satisfy the requirement of MEMS-based data storage system. A TMR sensor has been built on our yoke type head. We have investigated the planarized surface with AFM for higher accuracy. The polishing mechanisms for oxide and permalloy are studied based on the materials corrosion theory using Pourbaix diagram. In addition, the uniformity of wafer and a cleaning process as a post CMP process were also studied. For simple fabrication processes, a photoresist layer was used as a side wall insulation which reduces process steps such as oxide or nitride deposition, lift-off and

  10. Fabrication and Characterization of a CMOS-MEMS Humidity Sensor

    PubMed Central

    Dennis, John-Ojur; Ahmed, Abdelaziz-Yousif; Khir, Mohd-Haris

    2015-01-01

    This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of humidity on the active material layer of titanium dioxide (TiO2) nanoparticles deposited on the moving plate, which results in changes in the mass of the device. The sensor has been designed and fabricated through a standard 0.35 µm CMOS process technology and post-CMOS micromachining technique has been successfully implemented to release the MEMS structures. The sensor is operated in the dynamic mode using electrothermal actuation and the output signal measured using a piezoresistive (PZR) sensor connected in a Wheatstone bridge circuit. The output voltage of the humidity sensor increases from 0.585 mV to 30.580 mV as the humidity increases from 35% RH to 95% RH. The output voltage is found to be linear from 0.585 mV to 3.250 mV as the humidity increased from 35% RH to 60% RH, with sensitivity of 0.107 mV/% RH; and again linear from 3.250 mV to 30.580 mV as the humidity level increases from 60% RH to 95% RH, with higher sensitivity of 0.781 mV/% RH. On the other hand, the sensitivity of the humidity sensor increases linearly from 0.102 mV/% RH to 0.501 mV/% RH with increase in the temperature from 40 °C to 80 °C and a maximum hysteresis of 0.87% RH is found at a relative humidity of 80%. The sensitivity is also frequency dependent, increasing from 0.500 mV/% RH at 2 Hz to reach a maximum value of 1.634 mV/% RH at a frequency of 12 Hz, then decreasing to 1.110 mV/% RH at a frequency of 20 Hz. Finally, the CMOS-MEMS humidity sensor showed comparable response, recovery, and repeatability of measurements in three cycles as compared to a standard sensor that directly

  11. Fabrication and Characterization of a CMOS-MEMS Humidity Sensor.

    PubMed

    Dennis, John-Ojur; Ahmed, Abdelaziz-Yousif; Khir, Mohd-Haris

    2015-07-10

    This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of humidity on the active material layer of titanium dioxide (TiO2) nanoparticles deposited on the moving plate, which results in changes in the mass of the device. The sensor has been designed and fabricated through a standard 0.35 µm CMOS process technology and post-CMOS micromachining technique has been successfully implemented to release the MEMS structures. The sensor is operated in the dynamic mode using electrothermal actuation and the output signal measured using a piezoresistive (PZR) sensor connected in a Wheatstone bridge circuit. The output voltage of the humidity sensor increases from 0.585 mV to 30.580 mV as the humidity increases from 35% RH to 95% RH. The output voltage is found to be linear from 0.585 mV to 3.250 mV as the humidity increased from 35% RH to 60% RH, with sensitivity of 0.107 mV/% RH; and again linear from 3.250 mV to 30.580 mV as the humidity level increases from 60% RH to 95% RH, with higher sensitivity of 0.781 mV/% RH. On the other hand, the sensitivity of the humidity sensor increases linearly from 0.102 mV/% RH to 0.501 mV/% RH with increase in the temperature from 40 °C to 80 °C and a maximum hysteresis of 0.87% RH is found at a relative humidity of 80%. The sensitivity is also frequency dependent, increasing from 0.500 mV/% RH at 2 Hz to reach a maximum value of 1.634 mV/% RH at a frequency of 12 Hz, then decreasing to 1.110 mV/% RH at a frequency of 20 Hz. Finally, the CMOS-MEMS humidity sensor showed comparable response, recovery, and repeatability of measurements in three cycles as compared to a standard sensor that directly

  12. Polypyrrole actuators for tremor suppression

    NASA Astrophysics Data System (ADS)

    Skaarup, Steen; Mogensen, Naja; Bay, Lasse; West, Keld

    2003-07-01

    Neurological tremor affecting limbs can be divided into at least 6 different types with frequencies ranging from 2 to about 20 Hz. In order to alleviate the symptoms by suppressing the tremor, sensing and actuation systems able to perform at these frequencies are needed. Electroactive polymers exemplify "soft actuator" technology that may be especially suitable for use in conjunction with human limbs. The electrochemical and mechanical properties of polypyrrole dodecyl benzene sulphonate actuator films have been studied with this application in mind. The results show that the time constants for the change of length and for the stiffness change are significantly different; the stiffness change being about 10 times faster. Both force measurements and Electrochemical Quartz Crystal Microbalance measurements indicate that the actuation process is complex and involves at least two different processes. The EQCM results make it possible to formulate a hypothesis for the two different time constants: Sodium ions enter the polymer correlated with a fast mass change that probably involves a few (~4) strongly bound water molecules as well. On further reduction, about 10 additional water molecules enter the polymer in a slower process driven by osmotic pressure. Earlier work has tended to focus on achieving the maximum length change, therefore taking the time needed to include all processes. However, since the slower process described above is associated with the lowest strength of the actuator, concentrating on the faster stiffness change results in only a small reduction in the work done by the actuator. This may make actuation at higher frequencies feasible.

  13. Actuator design using electroactive polymers

    NASA Astrophysics Data System (ADS)

    Fernandez, Diego; Moreno, Luis; Baselga, Juan

    2005-07-01

    In order to make EAP actuators technology scalable a design methodology for polymer actuators is required. Design variables, optimization formulas and a general architecture are required as it is usual in electromagnetic or hydraulic actuators design. This will allow the development of large EAP actuators from micro-actuator units, specifically designed for a particular application. It will also help to enhance the EAP material final performance. This approach is not new, since it is found in Nature. Skeletal muscle architecture has a profound influence on muscle force-generating properties and functionality. Based on existing literature on skeletal muscle biomechanics, the Nature design philosophy is inferred. Formulas and curves employed by Nature in the design of muscles are presented. Design units such as fiber, tendon, aponeurosis, and motor units are compared with the equivalent design units to be taken into account in the design of EAP actuators. Finally a complete design methodology for the design of actuators based on multiple EAP fiber/sheets is proposed. In addition, the procedure gives an idea of the required parameters that must be clearly modeled and characterized at EAP material level prior to attempt the design of complex Electromechanical Systems based on Electroactive Polymers.

  14. Bone Scan

    MedlinePlus

    ... Mayo Clinic Staff A bone scan is a nuclear imaging test that helps diagnose and track several ... you're nursing. A bone scan is a nuclear imaging procedure. In nuclear imaging, tiny amounts of ...

  15. CT Scans

    MedlinePlus

    ... cross-sectional pictures of your body. Doctors use CT scans to look for Broken bones Cancers Blood clots Signs of heart disease Internal bleeding During a CT scan, you lie still on a table. The table ...

  16. Command profile for Galileo scan platform control

    NASA Astrophysics Data System (ADS)

    Man, G. K.; Breckenridge, W. G.

    1981-08-01

    A recursive command profile is developed for the control of a two-degree-of-freedom scan platform mounted on a flexible structure. Perfect sensors and actuators are assumed for development and testing, and structural vibrations are minimized by actuator torque commands following a smooth torque-time profile. The integral of the smooth torque profile, the rate profile, is recursively generated by a piecewise constant second derivation, and the torque applied by the closk actuator is divided into three components. Results show that the smooth platform motion in response to the command profiles is what the Galileo control systems needs to avoid stator structural vibrations. Position, rate and acceleration profiles are also presented, and the resulting motion of the scan platform in response to command profiles is illustrated.

  17. Gear-Driven Turnbuckle Actuator

    NASA Technical Reports Server (NTRS)

    Rivera, Ricky N.

    2010-01-01

    This actuator design allows the extension and contraction of turnbuckle assemblies. It can be operated manually or remotely, and is extremely compact. It is ideal for turnbuckles that are hard to reach by conventional tools. The tool assembly design solves the problem of making accurate adjustments to the variable geometry guide vanes without having to remove and reinstall the actuator system back on the engine. The actuator does this easily by adjusting the length of the turnbuckles while they are still attached to the engine.

  18. Electrically controlled polymeric gel actuators

    DOEpatents

    Adolf, Douglas B.; Shahinpoor, Mohsen; Segalman, Daniel J.; Witkowski, Walter R.

    1993-01-01

    Electrically controlled polymeric gel actuators or synthetic muscles capable of undergoing substantial expansion and contraction when subjected to changing pH environments, temperature, or solvent. The actuators employ compliant containers for the gels and their solvents. The gels employed may be cylindrical electromechanical gel fibers such as polyacrylamide fibers or a mixture of poly vinyl alcohol-polyacrylic acid arranged in a parallel aggregate and contained in an electrolytic solvent bath such as salt water. The invention includes smart, electrically activated devices exploiting this phenomenon. These devices are capable of being manipulated via active computer control as large displacement actuators for use in adaptive structure such as robots.

  19. Electrically controlled polymeric gel actuators

    DOEpatents

    Adolf, D.B.; Shahinpoor, M.; Segalman, D.J.; Witkowski, W.R.

    1993-10-05

    Electrically controlled polymeric gel actuators or synthetic muscles are described capable of undergoing substantial expansion and contraction when subjected to changing pH environments, temperature, or solvent. The actuators employ compliant containers for the gels and their solvents. The gels employed may be cylindrical electromechanical gel fibers such as polyacrylamide fibers or a mixture of poly vinyl alcohol-polyacrylic acid arranged in a parallel aggregate and contained in an electrolytic solvent bath such as salt water. The invention includes smart, electrically activated devices exploiting this phenomenon. These devices are capable of being manipulated via active computer control as large displacement actuators for use in adaptive structure such as robots. 11 figures.

  20. Si-based RF MEMS components.

    SciTech Connect

    Stevens, James E.; Nordquist, Christopher Daniel; Baker, Michael Sean; Fleming, James Grant; Stewart, Harold D.; Dyck, Christopher William

    2005-01-01

    Radio frequency microelectromechanical systems (RF MEMS) are an enabling technology for next-generation communications and radar systems in both military and commercial sectors. RF MEMS-based reconfigurable circuits outperform solid-state circuits in terms of insertion loss, linearity, and static power consumption and are advantageous in applications where high signal power and nanosecond switching speeds are not required. We have demonstrated a number of RF MEMS switches on high-resistivity silicon (high-R Si) that were fabricated by leveraging the volume manufacturing processes available in the Microelectronics Development Laboratory (MDL), a Class-1, radiation-hardened CMOS manufacturing facility. We describe novel tungsten and aluminum-based processes, and present results of switches developed in each of these processes. Series and shunt ohmic switches and shunt capacitive switches were successfully demonstrated. The implications of fabricating on high-R Si and suggested future directions for developing low-loss RF MEMS-based circuits are also discussed.

  1. A MEMS diamond hemispherical resonator

    NASA Astrophysics Data System (ADS)

    Bernstein, J. J.; Bancu, M. G.; Cook, E. H.; Chaparala, M. V.; Teynor, W. A.; Weinberg, M. S.

    2013-12-01

    In this paper we report the fabrication of hemispherical polycrystalline diamond resonators fabricated on a novel high-temperature glass substrate. The hemispherical resonator gyroscope is one of the most accurate and rugged of the mechanical gyroscopes, and can be operated in either rate or whole-angle mode due to its high degree of symmetry. A fabrication sequence for creating extremely symmetric 3D MEMS hemispheres is presented. Mode shapes and frequencies obtained with a laser vibrometer are shown, as well as curves of Q versus pressure, and the dependence of frequency on anchor size. Fundamental mode frequency matching to <0.1% in as-fabricated devices has been achieved, which is essential to gyroscope operation in whole-angle mode.

  2. Hydrophobic coatings for MEMS applications

    NASA Astrophysics Data System (ADS)

    Doms, M.; Feindt, H.; Kuipers, W. J.; Shewtanasoontorn, D.; Matar, A. S.; Brinkhues, S.; Welton, R. H.; Mueller, J.

    2008-05-01

    Different kinds of thin-film coatings were investigated with regard to their applicability as hydrophobic coatings for MEMS. The films were deposited onto silicon and borosilicate glass substrates by spincoating of Dyneon™ PTFE and PFA, plasmapolymerization of HMDS-N and C4F8 as well as liquid-phase and vapor-phase coating of SAMs from DDMS, FDTS, FOTS and Geleste Aquaphobe™ CM. The layer properties were analyzed using profilometry, FTIR, SEM and contact angle measurements. Furthermore, the adhesion of the layers to the substrates was determined in an acetone ultrasonic bath. The influence of various deposition process parameters on the properties of the films was investigated. As these layers can be used in microfluidic systems, as water-repellent layers and as anti-stiction coatings, they are suited for versatile fields of application.

  3. MEMS technologies for artificial retinas

    NASA Astrophysics Data System (ADS)

    Mokwa, Wilfried

    2010-02-01

    The mostly cause of blindness in the developed countries is a degeneration of the retina. For restoring this loss of vision one possible approach is the substitution of the lost functions by means of an electronic implant. This approach is based on MEMS technologies. It has been shown that electrical stimulation of retinal ganglion cells yield visual sensations1. Therefore, an artificial retina for blind humans based on this concept seems to be feasible. Besides electrical stimulation of retinal ganglion cells also the direct electrical stimulation of the optic nerve2 and the visual cortex3 have been under investigation. This paper wants to give an overview about the activities on the retinal ganglion cell stimulation.

  4. Arrayed SU-8 polymer thermal actuators with inherent real-time feedback for actively modifying MEMS’ substrate warpage

    NASA Astrophysics Data System (ADS)

    Wang, Xinghua; Xiao, Dingbang; Chen, Zhihua; Wu, Xuezhong

    2016-09-01

    This paper describes the design, fabrication and characterization of a batch-fabricated micro-thermal actuators array with inherent real-time self-feedback, which can be used to actively modify micro-electro-mechanical systems’ (MEMS’) substrate warpage. Arrayed polymer thermal actuators utilize SU-8 polymer (a thick negative photoresist) as a functional material with integrated Ti/Al film-heaters as a microscale heat source. The electro-thermo-mechanical response of a micro-fabricated actuator was measured. The resistance of the Al/Ti film resistor varies obviously with ambient temperature, which can be used as inherent feedback for observing real-time displacement of activated SU-8 bumps (0.43 μm Ω-1). Due to the high thermal expansion coefficient, SU-8 bumps tend to have relatively large deflection at low driving voltage and are very easily integrated with MEMS devices. Experimental results indicated that the proposed SU-8 polymer thermal actuators (array) are able to achieve accurate rectification of MEMS’ substrate warpage, which might find potential applications for solving stress-induced problems in MEMS.

  5. Fabrication and characterization of dry conducting polymer actuator by vapor phase polymerization of polypyrrole.

    PubMed

    Ramasamy, Madeshwaran Sekkarapatti; Mahapatra, Sibdas Singha; Cho, Jae Whan

    2014-10-01

    A trilayered dry conducting polymer actuator was fabricated via application of a polypyrrole (PPy) coating on both sides of a solid polymer electrolyte film using vapor phase polymerization (VPP). The solid polymer electrolyte film was prepared by incorporation of different weight ratios of dodecylbenzene sulfonic acid sodium salt in poly(vinyl alcohol) (PVA) by solvent casting. The successful polymerization of PPy was confirmed by Fourier transform infrared spectroscopy; a uniform PPy coating on the solid polymer electrolyte film surface was also observed by scanning electron microscopy. The dry PVA/PPy actuator demonstrated good actuation behavior at a low applied voltage of 1-3 V. The actuator bending displacement was found to increase with an increase in the applied voltage. The VPP approach in this study provides a very effective method for achieving a uniform polymer coating in the fabrication of a dry conducting polymer actuator.

  6. Preparation and characterization of sulfonated carbon nanotube/Nafion IPMC actuators

    NASA Astrophysics Data System (ADS)

    Ru, Jie; Wang, Yanjie; Chang, Longfei; Chen, Hualing; Li, Bo; Jia, Shuhai

    2016-04-01

    In this paper, we developed a new kind of ionic polymer metal composite (IPMC) actuator by doping sulfonated carbon nanotube (SCNT) into Nafion matrix to overcome some major drawbacks, such as low output force and short air-operation time, which restrict applications of conventional Nafion IPMC actuators. Firstly, SCNT was synthesized by coupled reaction of multi-walled carbon nanotubes and azo compounds and then doped into Nafion matrix by casting method. Subsequently, several key parameters of the SCNT-reinforced Nation matrix, water uptake ratio and equivalent stiffness, were revealed and the inner morphology of the membranes were observed by scanning electron microscopy. Finally, the effects of the SCNT on the electromechanical properties of IPMC actuators, especially the actuating performance, were evaluated experimentally and analyzed systematically. The results showed that SCNT was evenly dispersed in Nafion matrix and a small amount of SCNT could improve the performance of IPMC actuators significantly.

  7. Electronically reconfigurable and mechanically conformal apertures using low-voltage MEMS and flexible membranes for space-based radar applications

    NASA Astrophysics Data System (ADS)

    Bernhard, Jennifer T.; Chen, Nan-Wei; Clark, Randall; Feng, Milton; Liu, Chang; Mayes, Paul; Michielssen, Eric; Wang, Roy R.; Chorosinski, Leonard G.

    2001-08-01

    The University of Illinois and Northrop Grumman Corporation have teamed to integrate a wide band reconfigurable aperture array with associated wide band T/R functions on a flexible and foldable/rollable substrate for space based radar applications. Advanced MEMS and packaging techniques are used to make the antenna array lightweight, reliable, and reproducible. Soft flexible substrates make the antenna foldable/rollable with the associated electronics below the ground plane of the antenna elements. The individually reconfigurable antenna element uses MEMS switches to select between two broad frequency bands of operation. These MEMS switches have low actuation voltages and stress-free operation, improving the array's reliability. The reconfigurable antenna element is based on a low-profile radiator that provides greatly increased instantaneous bandwidth over microstrip patch antennas currently in place for phased array applications. Voltage-controlled MEMS switches are utilized to switch between stacked layers of elements that operate in the S- and X-bands. In each band, the antenna elements provide at least 25% instantaneous bandwidth. The challenges presented by the flexible substrate and the array design as well as experimental and simulated results for the antenna elements and switches are discussed.

  8. Vacuum Packaging for Microelectromechanical Systems (MEMS)

    DTIC Science & Technology

    2002-10-01

    The Vacuum Packaging for MEMS Program focused on the development of an integrated set of packaging technologies which in totality provide a low cost...high volume product-neutral vacuum packaging capability which addresses all MEMS vacuum packaging requirements. The program balanced the need for...near term component and wafer-level vacuum packaging with the development of advanced high density wafer-level packaging solutions. Three vacuum

  9. CMOS-MEMS Downconversion Mixer-Filters

    DTIC Science & Technology

    2005-12-01

    manufacturability by IC-compatible processes have promised the full-integration of RF-front ends. The pursuit of building a MEMS RF channel- select filter has...two-level reconfigurable radio architecture. Building an array of MEMS mixer-filters and integrating it with the neighboring circuits require a good...gives us the capability to build a resonator model from the atomic elements: beams, plates and gaps. NODAS uses the Verilog-A hardware modeling

  10. Wafer-Level Membrane-Transfer Process for Fabricating MEMS

    NASA Technical Reports Server (NTRS)

    Yang, Eui-Hyeok; Wiberg, Dean

    2003-01-01

    A process for transferring an entire wafer-level micromachined silicon structure for mating with and bonding to another such structure has been devised. This process is intended especially for use in wafer-level integration of microelectromechanical systems (MEMS) that have been fabricated on dissimilar substrates. Unlike in some older membrane-transfer processes, there is no use of wax or epoxy during transfer. In this process, the substrate of a wafer-level structure to be transferred serves as a carrier, and is etched away once the transfer has been completed. Another important feature of this process is that two electrodes constitutes an electrostatic actuator array. An SOI wafer and a silicon wafer (see Figure 1) are used as the carrier and electrode wafers, respectively. After oxidation, both wafers are patterned and etched to define a corrugation profile and electrode array, respectively. The polysilicon layer is deposited on the SOI wafer. The carrier wafer is bonded to the electrode wafer by using evaporated indium bumps. The piston pressure of 4 kPa is applied at 156 C in a vacuum chamber to provide hermetic sealing. The substrate of the SOI wafer is etched in a 25 weight percent TMAH bath at 80 C. The exposed buried oxide is then removed by using 49 percent HF droplets after an oxygen plasma ashing. The SOI top silicon layer is etched away by using an SF6 plasma to define the corrugation profile, followed by the HF droplet etching of the remaining oxide. The SF6 plasma with a shadow mask selectively etches the polysilicon membrane, if the transferred membrane structure needs to be patterned. Electrostatic actuators with various electrode gaps have been fabricated by this transfer technique. The gap between the transferred membrane and electrode substrate is very uniform ( 0.1 m across a wafer diameter of 100 mm, provided by optimizing the bonding control). Figure 2 depicts the finished product.

  11. A novel piezoresistive polymer nanocomposite MEMS accelerometer

    NASA Astrophysics Data System (ADS)

    Seena, V.; Hari, K.; Prajakta, S.; Pratap, Rudra; Ramgopal Rao, V.

    2017-01-01

    A novel polymer MEMS (micro electro mechanical systems) accelerometer with photo-patternable polymer nanocomposite as a piezoresistor is presented in this work. Polymer MEMS Accelerometer with beam thicknesses of 3.3 µm and embedded nanocomposite piezoresistive layer having a gauge factor of 90 were fabricated. The photosensitive nanocomposite samples were prepared and characterized for analyzing the mechanical and electrical properties and thereby ensuring proper process parameters for incorporating the piezoresistive layer into the polymer MEMS accelerometer. The microfabrication process flow and unit processes followed are extremely low cost with process temperatures below 100 °C. This also opens up a new possibility for easy integration of such polymer MEMS with CMOS (complementary metal oxide semiconductor) devices and circuits. The fabricated devices were characterized using laser Doppler vibrometer (LDV) and the devices exhibited a resonant frequency of 10.8 kHz and a response sensitivity of 280 nm g-1 at resonance. The main focus of this paper is on the SU-8/CB nanocomposite piezoresistive MEMS accelerometer technology development which covers the material and the fabrication aspects of these devices. CoventorWare FEA analysis performed using the extracted material properties from the experimental characterization which are in close agreement to performance parameters of the fabricated devices is also discussed. The simulated piezoresistive polymer MEMS devices showed an acceleration sensitivity of 126 nm g-1 and 82 ppm of ΔR/R per 1 g of acceleration.

  12. Challenges in the Packaging of MEMS

    SciTech Connect

    BROWN, WILLIAM D.; EATON, WILLIAM P.; MALSHE, AJAY P.; MILLER, WILLIAM M.; O'NEAL, CHAD; SINGH, SUSHILA B.

    1999-09-24

    Microelectromechanical Systems (MEMS) packaging is much different from conventional integrated circuit (IC) packaging. Many MEMS devices must interface to the environment in order to perform their intended function, and the package must be able to facilitate access with the environment while protecting the device. The package must also not interfere with or impede the operation of the MEMS device. The die attachment material should be low stress, and low outgassing, while also minimizing stress relaxation overtime which can lead to scale factor shifts in sensor devices. The fabrication processes used in creating the devices must be compatible with each other, and not result in damage to the devices. Many devices are application specific requiring custom packages that are not commercially available. Devices may also need media compatible packages that can protect the devices from harsh environments in which the MEMS device may operate. Techniques are being developed to handle, process, and package the devices such that high yields of functional packaged parts will result. Currently, many of the processing steps are potentially harmful to MEMS devices and negatively affect yield. It is the objective of this paper to review and discuss packaging challenges that exist for MEMS systems and to expose these issues to new audiences from the integrated circuit packaging community.

  13. From MEMS to NEMS with carbon.

    PubMed

    Wang, Chunlei; Madou, Marc

    2005-04-15

    Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication approach to battery miniaturization, active DNA arrays and a wide variety of chemical and biological sensors. In C-MEMS, photoresist is patterned by photolithography and subsequently pyrolyzed at high-temperatures in an oxygen-free environment. We established that it is possible to use C-MEMS to create very high-aspect ratio carbon structures (e.g. posts with an aspect ratio >10), suspended carbon plates and suspended carbon nanowires (C-NEMS). By changing the lithography conditions, soft and hard baking times and temperatures, additives to the resist, pyrolysis time, temperature and environment, C-MEMS permits a wide variety of interesting new MEMS and NEMS applications that employ structures having a wide variety of shapes, resistivities and mechanical properties. We also demonstrate that arrays of high-aspect ratio carbon posts can be charged/discharged with Li and this enables the fabrication of a smart switchable array of batteries.

  14. Power-Scavenging MEMS Robots

    DTIC Science & Technology

    2006-03-01

    designed to power a robot leg. 10 μm Pawl Shuttle Gap-Closing Actuator 38 Reported in 2003, a single SOI chip containing solar cells and...high-voltage transistors was fabricated [73]. In order to create the high voltages required to power the GCAs, 90 solar cells were connected in series...to produce a 50-V open-circuit voltage and 100 uW of power under solar illumination [74]. Separate sections of the solar cells could also be

  15. Variable Valve Actuation

    SciTech Connect

    Jeffrey Gutterman; A. J. Lasley

    2008-08-31

    Many approaches exist to enable advanced mode, low temperature combustion systems for diesel engines - such as premixed charge compression ignition (PCCI), Homogeneous Charge Compression Ignition (HCCI) or other HCCI-like combustion modes. The fuel properties and the quantity, distribution and temperature profile of air, fuel and residual fraction in the cylinder can have a marked effect on the heat release rate and combustion phasing. Figure 1 shows that a systems approach is required for HCCI-like combustion. While the exact requirements remain unclear (and will vary depending on fuel, engine size and application), some form of substantially variable valve actuation is a likely element in such a system. Variable valve actuation, for both intake and exhaust valve events, is a potent tool for controlling the parameters that are critical to HCCI-like combustion and expanding its operational range. Additionally, VVA can be used to optimize the combustion process as well as exhaust temperatures and impact the after treatment system requirements and its associated cost. Delphi Corporation has major manufacturing and product development and applied R&D expertise in the valve train area. Historical R&D experience includes the development of fully variable electro-hydraulic valve train on research engines as well as several generations of mechanical VVA for gasoline systems. This experience has enabled us to evaluate various implementations and determine the strengths and weaknesses of each. While a fully variable electro-hydraulic valve train system might be the 'ideal' solution technically for maximum flexibility in the timing and control of the valve events, its complexity, associated costs, and high power consumption make its implementation on low cost high volume applications unlikely. Conversely, a simple mechanical system might be a low cost solution but not deliver the flexibility required for HCCI operation. After modeling more than 200 variations of the

  16. Enzyme actuated bioresponsive hydrogels

    NASA Astrophysics Data System (ADS)

    Wilson, Andrew Nolan

    Bioresponsive hydrogels are emerging with technological significance in targeted drug delivery, biosensors and regenerative medicine. Conferred with the ability to respond to specific biologically derived stimuli, the design challenge is in effectively linking the conferred biospecificity with an engineered response tailored to the needs of a particular application. Moreover, the fundamental phenomena governing the response must support an appropriate dynamic range and limit of detection. The design of these systems is inherently complicated due to the high interdependency of the governing phenomena that guide the sensing, transduction, and the actuation response of hydrogels. To investigate the dynamics of these materials, model systems may be used which seek to interrogate the system dynamics by uni-variable experimentation and limit confounding phenomena such as: polymer-solute interactions, polymer swelling dynamics and biomolecular reaction-diffusion concerns. To this end, a model system, alpha-chymotrypsin (Cht) (a protease) and a cleavable peptide-chromogen (pro-drug) covalently incorporated into a hydrogel, was investigated to understand the mechanisms of covalent loading and release by enzymatic cleavage in bio-responsive delivery systems. Using EDC and Sulfo-NHS, terminal carboxyl groups of N-succinyl-Ala-Ala-Pro-Phe p-nitroanilide, a cleavable chromogen, were conjugated to primary amines of a hydrated poly(HEMA)-based hydrogel. Hydrogel discs were incubated in buffered Cht causing enzyme-mediated cleavage of the peptide and concomitant release of the chromophore for monitoring. To investigate substrate loading and the effects of hydrogel morphology on the system, the concentration of the amino groups (5, 10, 20, and 30 mol%) and the cross-linked density (1, 5, 7, 9 and 12 mol%) were independently varied. Loading-Release Efficiency of the chromogen was shown to exhibit a positive relation to increasing amino groups (AEMA). The release rates demonstrated a

  17. Data-glove-based fuzzy control of piezoelectric forceps actuator

    NASA Astrophysics Data System (ADS)

    Susanto, Ken; Yang, Bingen

    2004-07-01

    This paper discusses a novel concept idea of utilizing smart structure in biomedical, minimum invasive surgery (MIS), MEMS manufacturing assembly line and also as a miniature robotic gripper system. The proposed prototype of a miniature piezoelectric forceps actuator (PFA) is composed of two symmetric slightly curved composite beams which each bonded with piezoelectric ceramic layer. The PFA is an innovative forceps actuator that comes with a data glove. The data glove is simply a custom-made glove with two embedded resistance-bending sensors located on thumb and index fingers. Any users can control opening and closing of the PFA by just wearing the data glove. A thin curved beam theory bonded with piezoelectric ceramic will be derived based on Hamilton's principle and its deflection behavior will be simulated based on distributed transfer function method (DTFM). A feasibility study of simulation open loop data glove-based fuzzy logic controller allows the user to open and close the PFA remotely. The bending movement of the thumb and index finger will be formulated in a table of rules based to produce the necessary output controller gain to control the PFA.

  18. Hydraulically actuated well shifting tool

    SciTech Connect

    Roth, B.A.

    1992-10-20

    This patent describes a hydraulically actuated shifting tool for actuating a sliding member in a well tool. It comprises: a housing having a hydraulic fluid bore therein; shifting dog means positioned on the housing for movement away and toward the housing; locking dog means positioned on the housing for movement away and toward the body; shifting dog hydraulic actuating means in fluid communication with the bore for causing engagement of the shifting dogs with the sliding member; locking dog hydraulic actuating means in communication with the bore for causing engagement of the locking dogs with the locking means; and hydraulic shifting means in communication with the bore for causing relative movement between the shifting dog means and the locking dog means for shifting the sliding sleeve.

  19. Analog actuator-piston memory

    NASA Technical Reports Server (NTRS)

    Sable, B. A.

    1980-01-01

    Simple analog control system of digitally controlled acuator uses 'stopped' position of actuator as 'memory' and potentiometer as sensing element during power failure to reload drive circuit to value equal to its last position preceding power loss.

  20. Methods and apparatus for laser beam scanners with different actuating mechanisms

    NASA Astrophysics Data System (ADS)

    Chen, Si-hai; Xiang, Si-hua; Wu, Xin; Dong, Shan; Xiao, Ding; Zheng, Xia-wei

    2009-07-01

    In this paper, 3 types of laser beam scanner are introduced. One is transmissive beam scanner, which is composed of convex and concave microlens arrays (MLAs). By moving the concave lens in the plane vertical to the optical axis, the incident beam can be deflected in two dimensions. Those two kinds of MLAs are fabricated by thermal reflow and replication process. A set of mechanical scanner frame is fabricated with the two MLAs assembling in it. The testing result shown that the beam deflection angles are 9.5° and 9.6°, in the 2 dimension(2D) with the scanning frequency of 2 HZ and 8 HZ, respectively. The second type of laser beam scanner is actuated by voice coil actuators (VCAs). Based on ANSOFT MAXWELL software, we have designed VCAs with small size and large force which have optimized properties. The model of VCAs is built using AutoCAD and is analyzed by Ansoft maxwell. According to the simulation results, high performance VCAs are fabricated and tested. The result is that the force of the VCAs is 6.39N/A, and the displacement is +/-2.5mm. A set up of beam scanner is fabricated and actuated by the designed VCAs. The testing result shown that the two dimensional scanning angle is 15° and 10° respectively at the frequency of 60HZ. The two dimensional scanning angle is 8.3° and 6° respectively at the frequency of 100HZ. The third type of scanner is actuated by amplified piezoelectric actuators (APAs). The scanning mirror is actuated by the piezoelectric (PZ) actuators with the scanning frequency of 700HZ, 250HZ and 87HZ respectively. The optical scanning angle is +/-0.5° at the three frequencies.

  1. Temporal synchronization and spectral combining of pulses from fiber lasers Q-switched by independent MEMS micro-mirrors.

    PubMed

    Fabert, Marc; Desfarges-Berthelemot, Agnès; Kermène, Vincent; Crunteanu, Aurelian

    2012-09-24

    We present what we believe to be the first demonstration of spectral combining of multiple fiber lasers Q-switched by independent micro-electro-mechanical system (MEMS). By correlating the actuation of the individual MEMS devices, the associated Q-switched lasers can be operated in either synchronous or asynchronous modes in such a way that their overall combined output may result in high energy emission pulses or in laser emission with higher pulse repetition rate. In a proof-of-principle experiment, we demonstrate the combination of four individual Q-switched lasers (each of them operating at 20 kHz repetition rate) leading to a final laser system generating pulses with a repetition rate of 80 kHz.

  2. Acoustic actuation of bioinspired microswimmers.

    PubMed

    Kaynak, Murat; Ozcelik, Adem; Nourhani, Amir; Lammert, Paul E; Crespi, Vincent H; Huang, Tony Jun

    2017-01-31

    Acoustic actuation of bioinspired microswimmers is experimentally demonstrated. Microswimmers are fabricated in situ in a microchannel. Upon acoustic excitation, the flagellum of the microswimmer oscillates, which in turn generates linear or rotary movement depending on the swimmer design. The speed of these bioinspired microswimmers is tuned by adjusting the voltage amplitude applied to the acoustic transducer. Simple microfabrication and remote actuation are promising for biomedical applications.

  3. High torque miniature rotary actuator

    NASA Astrophysics Data System (ADS)

    Nalbandian, Ruben

    2005-07-01

    This paper summarizes the design and the development of a miniature rotary actuator (36 mm diameter by 100 mm length) used in spacecraft mechanisms requiring high torques and/or ultra-fine step resolution. This actuator lends itself to applications requiring high torque but with strict volume limitations which challenge the use of conventional rotary actuators. The design challenge was to develop a lightweight (less than 500 grams), very compact, high bandwidth, low power, thermally stable rotary actuator capable of producing torques in excess of 50 N.m and step resolutions as fine as 0.003 degrees. To achieve a relatively high torsional stiffness in excess of 1000 Nm/radian, the design utilizes a combination of harmonic drive and multistage planetary gearing. The unique design feature of this actuator that contributes to its light weight and extremely precise motion capability is a redundant stepper motor driving the output through a multistage reducing gearbox. The rotary actuator is powered by a high reliability space-rated stepper motor designed and constructed by Moog, Inc. The motor is a three-phase stepper motor of 15 degree step angle, producing twenty-four full steps per revolution. Since micro-stepping is not used in the design, and un-powered holding torque is exhibited at every commanded step, the rotary actuator is capable of reacting to torques as high as 35 Nm by holding position with the power off. The output is driven through a gear transmission having a total train ratio of 5120:1, resulting in a resolution of 0.003 degrees output rotation per motor step. The modular design of the multi-stage output transmission makes possible the addition of designs having different output parameters, such as lower torque and higher output speed capability. Some examples of an actuator family based on this growth capability will be presented in the paper.

  4. Flexible MEMS: A novel technology to fabricate flexible sensors and electronics

    NASA Astrophysics Data System (ADS)

    Tu, Hongen

    This dissertation presents the design and fabrication techniques used to fabricate flexible MEMS (Micro Electro Mechanical Systems) devices. MEMS devices and CMOS(Complementary Metal-Oxide-Semiconductor) circuits are traditionally fabricated on rigid substrates with inorganic semiconductor materials such as Silicon. However, it is highly desirable that functional elements like sensors, actuators or micro fluidic components to be fabricated on flexible substrates for a wide variety of applications. Due to the fact that flexible substrate is temperature sensitive, typically only low temperature materials, such as polymers, metals, and organic semiconductor materials, can be directly fabricated on flexible substrates. A novel technology based on XeF2(xenon difluoride) isotropic silicon etching and parylene conformal coating, which is able to monolithically incorporate high temperature materials and fluidic channels, was developed at Wayne State University. The technology was first implemented in the development of out-of-plane parylene microneedle arrays that can be individually addressed by integrated flexible micro-channels. These devices enable the delivery of chemicals with controlled temporal and spatial patterns and allow us to study neurotransmitter-based retinal prosthesis. The technology was further explored by adopting the conventional SOI-CMOS processes. High performance and high density CMOS circuits can be first fabricated on SOI wafers, and then be integrated into flexible substrates. Flexible p-channel MOSFETs (Metal-Oxide-Semiconductor Field-Effect-Transistors) were successfully integrated and tested. Integration of pressure sensors and flow sensors based on single crystal silicon has also been demonstrated. A novel smart yarn technology that enables the invisible integration of sensors and electronics into fabrics has been developed. The most significant advantage of this technology is its post-MEMS and post-CMOS compatibility. Various high

  5. Radio Frequency (RF) Micro-Electromechanical Systems (MEMS) Switches for Space Communications

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.; Ponchak, George E.; Scardelletti, Maximillian C.; Varaljay, Nicholas C.

    2000-01-01

    Micro-electromechanical systems (MEMS) is an emerging technology for radio frequency (RF) systems because it has the potential to dramatically decrease loss and improve efficiency. In this paper, we address the design and fabrication of novel MEMS switches being developed at NASA Glenn Research Center. Two types of switches are being developed: a microstrip series single pole single throw (SPST) switch and a coplanar waveguide (CPW) series SPST and single pole double throw (SPDT) switches. These are being fabricated as an integral part of 50 Ohm microstrip and CPW RF integrated circuits using microfabrication techniques. The construction of the switch relies on a cantilever beam that is partially supported by a dielectric post. The cantilever beam is electro-magnetically actuated. To decrease stiction, a Si3N4 thin film is deposited over the contact area. Thus, when the switch is closed, the ON-state insertion loss is governed by the parallel plate capacitance formed by the two contacts. The isolation in the OFF-state is governed by the parasitic capacitance when the cantilever is in the up position. RF MEMS switches have been demonstrated with 80% lower insertion loss than conventional solid state devices (GaAs Metal Semiconductor Field Effect Transistors (MESFETs) and Silicon PIN diodes) based switches. For example, a conventional GaAs five-bit phase shifter which is required for beam steering in a phased array antenna has approximately 7 dB of insertion loss at 26.5 GHz where as a comparable MEMS based phase shifter is expected to have only 2 dB of insertion loss. This translates into 56% lower power dissipation and therefore decreases the thermal load on the spacecraft and also reduces the power amplifier requirements. These benefits will enable NASA to build the next generation of deep space science crafts and micro/nano satellites.

  6. Piezoelectric Films for Innovations in the Field of MEMS and Biosensors

    NASA Astrophysics Data System (ADS)

    Muralt, P.

    Microelectromechanical systems (MEMS) were born as a new technological discipline during the 1980s (for an introductory textbook, see, for instance [1]). The idea of the pioneers was to enlarge capabilities of integrated circuits based on silicon beyond pure electronics by adding mechanical elements, which were made of silicon and further materials of semiconductor technology. The addition of mechanics extended the application range of silicon technology to motion sensors, pressure and force sensors, small actuators, and a number of acoustic and ultrasonic devices, most importantly resonators for signal treatment. In order to profit from the symbiosis with electronics, those mechanical elements should, of course, be controlled by electronic signals. Evidently, this new silicon technology makes sense only for small, miniaturized devices. The technical advantage comes from the fact that powerful thin-film deposition and patterning techniques as used for semiconductor fabrication allow unprecedented precision of mechanics in the nano- to micrometer range. As a large number of devices are produced in parallel on the same wafer (batch processing), the cost level is acceptable in spite of expensive fabrication tools, at least at high production volumes. Concerning processing, the chemistry of silicon turned out to be very helpful: high etching rates of anisotropic wet etching in a base solution (as, e.g., KOH) and anisotropic deep silicon etching in a plasma reactor are crucial issues in efficiently tailoring silicon. Over the last 20 years, MEMS technology has became a proven and mature technology with many applications. While "MEMS" is still taken as a standing brand name for the field, the actual MEMS field has become much wider than stipulated by the notion of electromechanics, including thermal, optical, magnetic, chemical, biochemical, and further functional properties. Also, the main material of the device is not necessarily silicon, but may be glass or plastics

  7. Large Scale Magnetostrictive Valve Actuator

    NASA Technical Reports Server (NTRS)

    Richard, James A.; Holleman, Elizabeth; Eddleman, David

    2008-01-01

    Marshall Space Flight Center's Valves, Actuators and Ducts Design and Development Branch developed a large scale magnetostrictive valve actuator. The potential advantages of this technology are faster, more efficient valve actuators that consume less power and provide precise position control and deliver higher flow rates than conventional solenoid valves. Magnetostrictive materials change dimensions when a magnetic field is applied; this property is referred to as magnetostriction. Magnetostriction is caused by the alignment of the magnetic domains in the material s crystalline structure and the applied magnetic field lines. Typically, the material changes shape by elongating in the axial direction and constricting in the radial direction, resulting in no net change in volume. All hardware and testing is complete. This paper will discuss: the potential applications of the technology; overview of the as built actuator design; discuss problems that were uncovered during the development testing; review test data and evaluate weaknesses of the design; and discuss areas for improvement for future work. This actuator holds promises of a low power, high load, proportionally controlled actuator for valves requiring 440 to 1500 newtons load.

  8. Thermally actuated piston micromirror arrays

    NASA Astrophysics Data System (ADS)

    Cowan, William D.; Bright, Victor M.

    1997-07-01

    This paper reports design and characterization testing of thermally actuated piston micromirror arrays. The micromirrors were fabricated in the DARPA-sponsored MUMPs polysilicon surface micromachining process. The power averaging characteristic of thermal actuation is exploited in a novel line addressing scheme which reduces wiring for an n2 array to 2n wires. Mirror deflections were measured with a microscope laser interferometer system equipped with a vacuum chamber. Data presented includes device uniformity, frequency response, and deflection versus drive power for varied ambient pressure. Initial test results confirm that thermally actuated piston micromirrors offer several advantages over more common electrostatic designs. Thermally actuated micromirrors offer greater deflections at drive voltages compatible with CMOS circuitry. Measured thermal piston micromirror deflection versus drive voltage is nonlinear, but does not exhibit the 'snap through instability' characteristic of electrostatic devices. Operation of thermally actuated devices in rarefied ambient significantly decreases power dissipation. For a given deflection range, the power reduction facilitated by vacuum operation makes large arrays feasible. Frequency response of thermally actuated devices is limited by the ability of the device to dissipate heat, but operation at 1 kHz rates is feasible.

  9. ZrCoCe Getter Films for MEMS Vacuum Packaging

    NASA Astrophysics Data System (ADS)

    Xu, Yaohua; Cui, Jiandong; Cui, Hang; Zhou, Hao; Yang, Zhimin; Du, Jun

    2016-01-01

    In order to specifically support the technology trend of increased miniaturization of micro electro mechanical systems (MEMS) devices, highly porous ZrCoCe non-evaporable getter (NEG) film has been produced by direct current magnetron sputtering from a preformed ZrCoCe alloy target. Scanning electron microscopy and x-ray diffraction analysis indicated that the ZrCoCe film is constructed with porous columnar crystals, which are further built up with assembled ZrCoCe amorphous or nanocrystalline grains with an average grain size of 5 nm. Gas sorption investigation shows that this film can be activated at a low temperature of 300°C for 30 min and has excellent stable sorption characteristics. Sorption properties can be further improved with elevating activation temperatures due to nanocrystals growing and amorphous regions crystallizing. The capability of ZrCoCe films to withstand wafer physical or chemical cleaning processes is investigated, indicating their compatibility with MEMS vacuum packaging and the appropriate way to store them.

  10. Multiple switch actuator

    DOEpatents

    Beyer, Edward T.

    1976-01-06

    The present invention relates to switches and switch actuating devices to be operated for purposes of arming a bomb or other missile as it is dropped or released from an aircraft. The particular bomb or missile in which this invention is applied is one in which there is a plurality of circuits which are to be armed by the closing of switches upon dropping or releasing of the bomb. The operation of the switches to closed position is normally accomplished by means of a pull-out wire; that is, a wire which is withdrawn from the bomb or missile at the time of release of the bomb, one end of the wire being attached to the aircraft. The conditions to be met are that the arming switches must be positively and surely maintained in open position until the bomb is released and the arming action is effected. The action of the pull-out wire in achieving the arming action must be sure and positive with minimum danger of malfunctioning, jamming or binding.

  11. Explosive actuated valve

    DOEpatents

    Byrne, Kenneth G.

    1983-01-01

    1. A device of the character described comprising the combination of a housing having an elongate bore and including a shoulder extending inwardly into said bore, a single elongate movable plunger disposed in said bore including an outwardly extending flange adjacent one end thereof overlying said shoulder, normally open conduit means having an inlet and an outlet perpendicularly piercing said housing intermediate said shoulder and said flange and including an intermediate portion intersecting and normally openly communicating with said bore at said shoulder, normally closed conduit means piercing said housing and intersecting said bore at a location spaced from said normally open conduit means, said elongate plunger including a shearing edge adjacent the other end thereof normally disposed intermediate both of said conduit means and overlying a portion of said normally closed conduit means, a deformable member carried by said plunger intermediate said flange and said shoulder and normally spaced from and overlying the intermediate portion of said normally open conduit means, and means on the housing communicating with the bore to retain an explosive actuator for moving said plunger to force the deformable member against the shoulder and extrude a portion of the deformable member out of said bore into portions of the normally open conduit means for plugging the same and to effect the opening of said normally closed conduit means by the plunger shearing edge substantially concomitantly with the plugging of the normally open conduit means.

  12. Downhole hydraulic actuated pump

    SciTech Connect

    Roeder, G.K.

    1988-09-06

    This patent describes a downhole hydraulically actuated pump assembly of the type having a main housing within which an engine and pump is enclosed; a connecting rod, an engine piston, a pump plunger, means by which the engine and connecting rod reciprocate the pump plunger and thereby produces fluid; the main housing has a lower end having a formation fluid inlet; and upper end having a power fluid inlet; and, a produced fluid outlet; the plunger divides one marginal end of the housing into upper and lower production chambers; the lower end of the connecting rod is hollow and extends through the plunger into fluid communication with the formation fluid inlet to provide a source of formation fluid for the upper and lower production chambers; a traveling value assembly contained within the plunger and arranged to transfer formation fluid from the hollow rod, through the plunger, and into the upper and lower production chambers, respectively, as the plunger upstrokes and downstrokes; produced fluid valve means by which fluid flows from the upper and lower production chambers and through the produced fluid outlet.

  13. Quick actuating closure

    NASA Technical Reports Server (NTRS)

    White, III, Dorsey E. (Inventor); Updike, deceased, Benjamin T. (Inventor); Allred, Johnny W. (Inventor)

    1989-01-01

    A quick actuating closure for a pressure vessel 80 in which a wedge ring 30 with a conical outer surface 31 is moved forward to force shear blocks 40, with conical inner surfaces 41, radially outward to lock an end closure plug 70 within an opening 81 in the pressure vessel 80. A seal ring 60 and a preload ramp 50 sit between the shear blocks 40 and the end closure plug 70 to provide a backup sealing capability. Conical surfaces 44 and 55 of the preload ramp 50 and the shear blocks 40 interact to force the seal ring 60 into shoulders 73 and 85 in the end closure plug 70 and opening 81 to form a tight seal. The end closure plug 70 is unlocked by moving the wedge ring 30 rearward, which causes T-bars 32 of the wedge ring 30 riding within T -slots 42 of the shear blocks 40 to force them radially inward. The end closure plug 70 is then removed, allowing access to the interior of the pressure vessel 80.

  14. Note: Seesaw actuation of atomic force microscope probes for improved imaging bandwidth and displacement range

    SciTech Connect

    Torun, H.; Torello, D.; Degertekin, F. L.

    2011-08-15

    The authors describe a method of actuation for atomic force microscope (AFM) probes to improve imaging speed and displacement range simultaneously. Unlike conventional piezoelectric tube actuation, the proposed method involves a lever and fulcrum ''seesaw'' like actuation mechanism that uses a small, fast piezoelectric transducer. The lever arm of the seesaw mechanism increases the apparent displacement range by an adjustable gain factor, overcoming the standard tradeoff between imaging speed and displacement range. Experimental characterization of a cantilever holder implementing the method is provided together with comparative line scans obtained with contact mode imaging. An imaging bandwidth of 30 kHz in air with the current setup was demonstrated.

  15. Carbide-derived carbon (CDC) linear actuator properties in combination with conducting polymers

    NASA Astrophysics Data System (ADS)

    Kiefer, Rudolf; Aydemir, Nihan; Torop, Janno; Kilmartin, Paul A.; Tamm, Tarmo; Kaasik, Friedrich; Kesküla, Arko; Travas-Sejdic, Jadranka; Aabloo, Alvo

    2014-03-01

    Carbide-derived Carbon (CDC) material is applied for super capacitors due to their nanoporous structure and their high charging/discharging capability. In this work we report for the first time CDC linear actuators and CDC combined with polypyrrole (CDC-PPy) in ECMD (Electrochemomechanical deformation) under isotonic (constant force) and isometric (constant length) measurements in aqueous electrolyte. CDC-PPy actuators showing nearly double strain under cyclic voltammetric and square wave potential measurements in comparison to CDC linear actuators. The new material is investigated by SEM (scanning electron microscopy) and EDX (energy dispersive X-ray analysis) to reveal how the conducting polymer layer and the CDC layer interfere together.

  16. Deformable MEMS mirrors in secure optical communication system

    NASA Astrophysics Data System (ADS)

    Ziph-Schatzberg, Leah; Bifano, Thomas; Cornelissen, Steven; Stewart, Jason; Bleier, Zvi

    2009-05-01

    An optical communication system suitable for voice communication, data retrieval from remote sensors and identification had been designed, built and tested. The system design allows operation at ranges of several hundred meters. The heart of the system is a modulated MEMS mirror that is electrostatically actuated and changes between a flat reflective state and a corrugated diffractive state. A process for mass producing these mirrors at low cost was developed and implemented. The mirror was incorporated as a facet in a hollow retro-reflector, allowing temporal modulation of an interrogating beam and the return of the modulated beam to the interrogator. This modulator unit thus consists of a low power, small and light communication node with large (about 60°) angular extent. The system's range and pointing are determined by the interrogator /detector / demodulator unit (the transceiver), whereas the communicating node remains small, low power and low cost. This transceiver is comprised of a magnified optical channel to establish line of sight communication, an interrogating laser at 1550nm, an avalanche photo diode to detect the return signal and electronics to drive the laser and demodulate the returned signal and convert it to an audio signal. Voice communication in free space was demonstrated at ranges larger than 200 meters. A new retro-reflector design, incorporating more modulated mirrors had been constructed. This configuration was built and tested. Its performance and advantages as compared to the single mirror retro-reflector are discussed. An alternative system design that allows higher bandwidth data transmission is described

  17. Secure optical communication system utilizing deformable MEMS mirrors

    NASA Astrophysics Data System (ADS)

    Ziph-Schatzberg, Leah; Bifano, Thomas; Cornelissen, Steven; Stewart, Jason; Bleier, Zvi

    2009-02-01

    An optical communication system suitable for voice, data retrieval from remote sensors and identification is described. The system design allows operation at ranges of several hundred meters. The heart of the system is a modulated MEMS mirror that is electrostatically actuated and changes between a flat reflective state and a corrugated diffractive state. A process for mass producing these mirrors at low cost was developed and is described. The mirror was incorporated as a facet in a hollow retro-reflector, allowing temporal modulation of an interrogating beam and the return of the modulated beam to the interrogator. This system thus consists of a low power, small and light communication node with large (about 60°) angular extent. The system's range and pointing are determined by the interrogator /detector/demodulator (Transceiver) unit. The transceiver is comprised of an optical channel to establish line of sight communication, an interrogating laser at 1550nm, an avalanche photo diode to detect the return signal and electronics to drive the laser and demodulate the detected signal and convert it to an audio signal. A functional prototype system was built using a modified compact optical sight as the transceiver. Voice communication in free space was demonstrated. The design and test of major components and the complete system are discussed.

  18. Fast optical-resolution photoacoustic microscopy using a 2-axis water-proofing MEMS scanner

    PubMed Central

    Kim, Jin Young; Lee, Changho; Park, Kyungjin; Lim, Geunbae; Kim, Chulhong

    2015-01-01

    Optical-resolution photoacoustic microscopy (OR-PAM) is a novel label-free microscopic imaging tool to provide in vivo optical absorbing contrasts. Specially, it is crucial to equip a real-time imaging capability without sacrificing high signal-to-noise ratios (SNRs) for identifying and tracking specific diseases in OR-PAM. Herein we demonstrate a 2-axis water-proofing MEMS scanner made of flexible PDMS. This flexible scanner results in a wide scanning range (9 × 4 mm2 in a transverse plane) and a fast imaging speed (5 B-scan images per second). Further, the MEMS scanner is fabricated in a compact footprint with a size of 15 × 15 × 15 mm3. More importantly, the scanning ability in water makes the MEMS scanner possible to confocally and simultaneously reflect both ultrasound and laser, and consequently we can maintain high SNRs. The lateral and axial resolutions of the OR-PAM system are 3.6 and 27.7 μm, respectively. We have successfully monitored the flow of carbon particles in vitro with a volumetric display frame rate of 0.14 Hz. Finally, we have successfully obtained in vivo PA images of microvasculatures in a mouse ear. It is expected that our compact and fast OR-PAM system can be significantly useful in both preclinical and clinical applications. PMID:25604654

  19. Dry actuation testing of viscous drag micropumping systems for determination of optimal drive waveforms

    NASA Astrophysics Data System (ADS)

    Sosnowchik, Brian D.; Galambos, Paul C.; Sharp, Kendra V.; Jenkins, Mark W.; Horn, Mark W.; Hendrix, Jason R.

    2003-12-01

    This paper presents the dry actuation testing procedures and results for novel viscous drag micropumping systems. To overcome the limitations of previously developed mechanical pumps, we have developed pumps that are surface micromachined for efficient mass production which utilize viscous drag (dominant at low Reynolds numbers typical of microfluidics) to move fluid. The SUMMiT (www.sandia.gov/micromachine) fabricated pumps, presented first by Kilani et al., are being experimentally and computationally analyzed. In this paper we will describe the development of optimal waveforms to drive the electrostatic pumping mechanism while dry. While wet actuation will be significantly different, dry testing provides insight into how to optimally move the mechanism and differences between dry and wet actuation can be used to isolate fluid effects. Characterization began with an analysis of the driving voltage waveforms for the torsional ratcheting actuator (TRA), a micro-motor that drove the gear transmission for the pump, actuated with SAMA (Sandia"s Arbitrary waveform MEMS Actuator), a new waveform generating computer program with the ability to generate and output arbitrary voltage signals. Based upon previous research, a 50% duty cycle half-sine wave was initially selected for actuation of the TRA. However, due to the geometry of the half-sine waveform, the loaded micromotor could not transmit the motion required to pump the tested liquids. Six waveforms were then conceived, constructed, and selected for device actuation testing. Dry actuation tests included high voltage, low voltage, high frequency, and endurance/reliability testing of the TRA, gear transmission and pump assembly. In the SUMMiT process, all of the components of the system are fabricated together on one silicon chip already assembled in a monolithic microfabrication process. A 40% duty cycle quarter-sine waveform with a 20% DC at 60V has currently proved to be the most reliable, allowing for an 825Hz

  20. Dry actuation testing of viscous drag micropumping systems for determination of optimal drive waveforms

    NASA Astrophysics Data System (ADS)

    Sosnowchik, Brian D.; Galambos, Paul C.; Sharp, Kendra V.; Jenkins, Mark W.; Horn, Mark W.; Hendrix, Jason R.

    2004-01-01

    This paper presents the dry actuation testing procedures and results for novel viscous drag micropumping systems. To overcome the limitations of previously developed mechanical pumps, we have developed pumps that are surface micromachined for efficient mass production which utilize viscous drag (dominant at low Reynolds numbers typical of microfluidics) to move fluid. The SUMMiT (www.sandia.gov/micromachine) fabricated pumps, presented first by Kilani et al., are being experimentally and computationally analyzed. In this paper we will describe the development of optimal waveforms to drive the electrostatic pumping mechanism while dry. While wet actuation will be significantly different, dry testing provides insight into how to optimally move the mechanism and differences between dry and wet actuation can be used to isolate fluid effects. Characterization began with an analysis of the driving voltage waveforms for the torsional ratcheting actuator (TRA), a micro-motor that drove the gear transmission for the pump, actuated with SAMA (Sandia"s Arbitrary waveform MEMS Actuator), a new waveform generating computer program with the ability to generate and output arbitrary voltage signals. Based upon previous research, a 50% duty cycle half-sine wave was initially selected for actuation of the TRA. However, due to the geometry of the half-sine waveform, the loaded micromotor could not transmit the motion required to pump the tested liquids. Six waveforms were then conceived, constructed, and selected for device actuation testing. Dry actuation tests included high voltage, low voltage, high frequency, and endurance/reliability testing of the TRA, gear transmission and pump assembly. In the SUMMiT process, all of the components of the system are fabricated together on one silicon chip already assembled in a monolithic microfabrication process. A 40% duty cycle quarter-sine waveform with a 20% DC at 60V has currently proved to be the most reliable, allowing for an 825Hz