Science.gov

Sample records for aerial image metrology

  1. Automated hotspot analysis with aerial image CD metrology for advanced logic devices

    NASA Astrophysics Data System (ADS)

    Buttgereit, Ute; Trautzsch, Thomas; Kim, Min-ho; Seo, Jung-Uk; Yoon, Young-Keun; Han, Hak-Seung; Chung, Dong Hoon; Jeon, Chan-Uk; Meyers, Gary

    2014-09-01

    Continuously shrinking designs by further extension of 193nm technology lead to a much higher probability of hotspots especially for the manufacturing of advanced logic devices. The CD of these potential hotspots needs to be precisely controlled and measured on the mask. On top of that, the feature complexity increases due to high OPC load in the logic mask design which is an additional challenge for CD metrology. Therefore the hotspot measurements have been performed on WLCD from ZEISS, which provides the benefit of reduced complexity by measuring the CD in the aerial image and qualifying the printing relevant CD. This is especially of advantage for complex 2D feature measurements. Additionally, the data preparation for CD measurement becomes more critical due to the larger amount of CD measurements and the increasing feature diversity. For the data preparation this means to identify these hotspots and mark them automatically with the correct marker required to make the feature specific CD measurement successful. Currently available methods can address generic pattern but cannot deal with the pattern diversity of the hotspots. The paper will explore a method how to overcome those limitations and to enhance the time-to-result in the marking process dramatically. For the marking process the Synopsys WLCD Output Module was utilized, which is an interface between the CATS mask data prep software and the WLCD metrology tool. It translates the CATS marking directly into an executable WLCD measurement job including CD analysis. The paper will describe the utilized method and flow for the hotspot measurement. Additionally, the achieved results on hotspot measurements utilizing this method will be presented.

  2. Aerial imaging technology for photomask qualification: from a microscope to a metrology tool

    NASA Astrophysics Data System (ADS)

    Garetto, Anthony; Scherübl, Thomas; Peters, Jan Hendrik

    2012-09-01

    Photomasks carry the structured information of the chip designs printed with lithography scanners onto wafers. These structures, for the most modern technologies, are enlarged by a factor of 4 with respect to the final circuit design, and 20-60 of these photomasks are needed for the production of a single completed chip used, for example, in computers or cell phones. Lately, designs have been reported to be on the drawing board with close to 100 of these layers. Each of these photomasks will be reproduced onto the wafer several hundred times and typically 5000-50 000 wafers will be produced with each of them. Hence, the photomasks need to be absolutely defect-free to avoid any fatal electrical shortcut in the design or drastic performance degradation. One well-known method in the semiconductor industry is to analyze the aerial image of the photomask in a dedicated tool referred to as Aerial Imaging Measurement System, which emulates the behavior of the respective lithography scanner used for the imaging of the mask. High-end lithography scanners use light with a wavelength of 193 nm and high numerical apertures (NAs) of 1.35 utilizing a water film between the last lens and the resist to be illuminated (immersion scanners). Complex illumination shapes enable the imaging of structures well below the wavelength used. Future lithography scanners will work at a wavelength of 13.5 nm [extreme ultraviolet (EUV)] and require the optical system to work with mirrors in vacuum instead of the classical lenses used in current systems. The exact behavior of these systems is emulated by the Aerial Image Measurement System (AIMS™; a Trademark of Carl Zeiss). With these systems, any position of the photomask can be imaged under the same illumination condition used by the scanners, and hence, a prediction of the printing behavior of any structure can be derived. This system is used by mask manufacturers in their process flow to review critical defects or verify defect repair

  3. Aerial Image Systems

    NASA Astrophysics Data System (ADS)

    Clapp, Robert E.

    1987-09-01

    Aerial images produce the best stereoscopic images of the viewed world. Despite the fact that every optic in existence produces an aerial image, few persons are aware of their existence and possible uses. Constant reference to the eye and other optical systems have produced a psychosis of design that only considers "focal planes" in the design and analysis of optical systems. All objects in the field of view of the optical device are imaged by the device as an aerial image. Use of aerial images in vision and visual display systems can provide a true stereoscopic representation of the viewed world. This paper discusses aerial image systems - their applications and designs and presents designs and design concepts that utilize aerial images to obtain superior visual displays, particularly with application to visual simulation.

  4. Aerial Photographs and Satellite Images

    USGS Publications Warehouse

    U.S. Geological Survey

    1997-01-01

    Photographs and other images of the Earth taken from the air and from space show a great deal about the planet's landforms, vegetation, and resources. Aerial and satellite images, known as remotely sensed images, permit accurate mapping of land cover and make landscape features understandable on regional, continental, and even global scales. Transient phenomena, such as seasonal vegetation vigor and contaminant discharges, can be studied by comparing images acquired at different times. The U.S. Geological Survey (USGS), which began using aerial photographs for mapping in the 1930's, archives photographs from its mapping projects and from those of some other Federal agencies. In addition, many images from such space programs as Landsat, begun in 1972, are held by the USGS. Most satellite scenes can be obtained only in digital form for use in computer-based image processing and geographic information systems, but in some cases are also available as photographic products.

  5. Aerial Video Imaging

    NASA Technical Reports Server (NTRS)

    1991-01-01

    When Michael Henry wanted to start an aerial video service, he turned to Johnson Space Center for assistance. Two NASA engineers - one had designed and developed TV systems in Apollo, Skylab, Apollo- Soyuz and Space Shuttle programs - designed a wing-mounted fiberglass camera pod. Camera head and angles are adjustable, and the pod is shaped to reduce vibration. The controls are located so a solo pilot can operate the system. A microprocessor displays latitude, longitude, and bearing, and a GPS receiver provides position data for possible legal references. The service has been successfully utilized by railroads, oil companies, real estate companies, etc.

  6. MOSAIC: a new wavefront metrology

    SciTech Connect

    Anderson, Christopher; Naulleau, Patrick

    2009-02-02

    MOSAIC is a new wavefront metrology that enables complete wavefront characterization from print or aerial image based measurements. Here we describe MOSAIC and verify its utility with a model-based proof of principle.

  7. Metrological characterization of 3D imaging devices

    NASA Astrophysics Data System (ADS)

    Guidi, G.

    2013-04-01

    Manufacturers often express the performance of a 3D imaging device in various non-uniform ways for the lack of internationally recognized standard requirements for metrological parameters able to identify the capability of capturing a real scene. For this reason several national and international organizations in the last ten years have been developing protocols for verifying such performance. Ranging from VDI/VDE 2634, published by the Association of German Engineers and oriented to the world of mechanical 3D measurements (triangulation-based devices), to the ASTM technical committee E57, working also on laser systems based on direct range detection (TOF, Phase Shift, FM-CW, flash LADAR), this paper shows the state of the art about the characterization of active range devices, with special emphasis on measurement uncertainty, accuracy and resolution. Most of these protocols are based on special objects whose shape and size are certified with a known level of accuracy. By capturing the 3D shape of such objects with a range device, a comparison between the measured points and the theoretical shape they should represent is possible. The actual deviations can be directly analyzed or some derived parameters can be obtained (e.g. angles between planes, distances between barycenters of spheres rigidly connected, frequency domain parameters, etc.). This paper shows theoretical aspects and experimental results of some novel characterization methods applied to different categories of active 3D imaging devices based on both principles of triangulation and direct range detection.

  8. Image-based EUVL aberration metrology

    NASA Astrophysics Data System (ADS)

    Fenger, Germain Louis

    A significant factor in the degradation of nanolithographic image fidelity is optical wavefront aberration. As resolution of nanolithography systems increases, effects of wavefront aberrations on aerial image become more influential. The tolerance of such aberrations is governed by the requirements of features that are being imaged, often requiring lenses that can be corrected with a high degree of accuracy and precision. Resolution of lithographic systems is driven by scaling wavelength down and numerical aperture (NA) up. However, aberrations are also affected from the changes in wavelength and NA. Reduction in wavelength or increase in NA result in greater impact of aberrations, where the latter shows a quadratic dependence. Current demands in semiconductor manufacturing are constantly pushing lithographic systems to operate at the diffraction limit; hence, prompting a need to reduce all degrading effects on image properties to achieve maximum performance. Therefore, the need for highly accurate in-situ aberration measurement and correction is paramount. In this work, an approach has been developed in which several targets including phase wheel, phase disk, phase edges, and binary structures are used to generate optical images to detect and monitor aberrations in extreme ultraviolet (EUV) lithographic systems. The benefit of using printed patterns as opposed to other techniques is that the lithography system is tested under standard operating conditions. Mathematical models in conjunction with iterative lithographic simulations are used to determine pupil phase wavefront errors and describe them as combinations of Zernike polynomials.

  9. Optimization of image-based aberration metrology for EUV lithography

    NASA Astrophysics Data System (ADS)

    Levinson, Zac; Fenger, Germain; Burbine, Andrew; Schepis, Anthony R.; Smith, Bruce W.

    2014-04-01

    EUV lithography is likely more sensitive to drift from thermal and degradation effects than optical counterparts. We have developed an automated approach to photoresist image-based aberration metrology. The approach uses binary or phase mask targets and iterative simulation based solutions to retrieve an aberrated pupil function. It is well known that a partially coherent source both allows for the diffraction information of smaller features to be collected by the condenser system, and introduces pupil averaging. In general, smaller features are more sensitive to aberrations than larger features, so there is a trade-off between target sensitivity and printability. Therefore, metrology targets using this technique must be optimized for maximum sensitivity with each illumination system. This study examines aberration metrology target optimization and suggests an optimization scheme for use with any source. Interrogation of both low and high order aberrations is considered. High order aberration terms are interrogated using two separate fitting algorithms. While the optimized targets do show the lowest RMS error under the test conditions, a desirable RMS error is not achieved by either high order interrogation scheme. The implementation of a previously developed algorithm for image-based aberration metrology is used to support this work.

  10. Calculating aerial images from EUV masks

    NASA Astrophysics Data System (ADS)

    Pistor, Thomas V.; Neureuther, Andrew R.

    1999-06-01

    Aerial images for line/space patterns, arrays of posts and an arbitrary layout pattern are calculated for EUV masks in a 4X EUV imaging system. Both mask parameters and illumination parameters are varied to investigate their effects on the aerial image. To facilitate this study, a parallel version of TEMPEST with a Fourier transform boundary condition was developed and run on a network of 24 microprocessors. Line width variations are observed when absorber thickness or sidewall angle changes. As the line/space pattern scales to smaller dimensions, the aspect ratios of the absorber features increase, introducing geometric shadowing and reducing aerial image intensity and contrast. 100nm square posts have circular images of diameter close to 100nm, but decreasing in diameter significantly when the corner round radius at the mask becomes greater than 50 nm. Exterior mask posts image slightly smaller and with higher ellipticity than interior mask posts. The aerial image of the arbitrary test pattern gives insight into the effects of the off-axis incidence employed in EUV lithography systems.

  11. Metrology Standards for Quantitative Imaging Biomarkers.

    PubMed

    Sullivan, Daniel C; Obuchowski, Nancy A; Kessler, Larry G; Raunig, David L; Gatsonis, Constantine; Huang, Erich P; Kondratovich, Marina; McShane, Lisa M; Reeves, Anthony P; Barboriak, Daniel P; Guimaraes, Alexander R; Wahl, Richard L

    2015-12-01

    Although investigators in the imaging community have been active in developing and evaluating quantitative imaging biomarkers (QIBs), the development and implementation of QIBs have been hampered by the inconsistent or incorrect use of terminology or methods for technical performance and statistical concepts. Technical performance is an assessment of how a test performs in reference objects or subjects under controlled conditions. In this article, some of the relevant statistical concepts are reviewed, methods that can be used for evaluating and comparing QIBs are described, and some of the technical performance issues related to imaging biomarkers are discussed. More consistent and correct use of terminology and study design principles will improve clinical research, advance regulatory science, and foster better care for patients who undergo imaging studies. PMID:26267831

  12. Aerial photographs and satellite images

    USGS Publications Warehouse

    U.S. Geological Survey

    1995-01-01

    Because photographs and images taken from the air or from space are acquired without direct contact with the ground, they are referred to as remotely sensed images. The U.S. Geological Survey (USGS) has used remote sensing from the early years of the 20th century to support earth science studies and for mapping purposes.

  13. Compressive imaging and dual moire laser interferometer as metrology tools

    NASA Astrophysics Data System (ADS)

    Abolbashari, Mehrdad

    Metrology is the science of measurement and deals with measuring different physical aspects of objects. In this research the focus has been on two basic problems that metrologists encounter. The first problem is the trade-off between the range of measurement and the corresponding resolution; measurement of physical parameters of a large object or scene accompanies by losing detailed information about small regions of the object. Indeed, instruments and techniques that perform coarse measurements are different from those that make fine measurements. This problem persists in the field of surface metrology, which deals with accurate measurement and detailed analysis of surfaces. For example, laser interferometry is used for fine measurement (in nanometer scale) while to measure the form of in object, which lies in the field of coarse measurement, a different technique like moire technique is used. We introduced a new technique to combine measurement from instruments with better resolution and smaller measurement range with those with coarser resolution and larger measurement range. We first measure the form of the object with coarse measurement techniques and then make some fine measurement for features in regions of interest. The second problem is the measurement conditions that lead to difficulties in measurement. These conditions include low light condition, large range of intensity variation, hyperspectral measurement, etc. Under low light condition there is not enough light for detector to detect light from object, which results in poor measurements. Large range of intensity variation results in a measurement with some saturated regions on the camera as well as some dark regions. We use compressive sampling based imaging systems to address these problems. Single pixel compressive imaging uses a single detector instead of array of detectors and reconstructs a complete image after several measurements. In this research we examined compressive imaging for different

  14. 3D Buildings Extraction from Aerial Images

    NASA Astrophysics Data System (ADS)

    Melnikova, O.; Prandi, F.

    2011-09-01

    This paper introduces a semi-automatic method for buildings extraction through multiple-view aerial image analysis. The advantage of the used semi-automatic approach is that it allows processing of each building individually finding the parameters of buildings features extraction more precisely for each area. On the early stage the presented technique uses an extraction of line segments that is done only inside of areas specified manually. The rooftop hypothesis is used further to determine a subset of quadrangles, which could form building roofs from a set of extracted lines and corners obtained on the previous stage. After collecting of all potential roof shapes in all images overlaps, the epipolar geometry is applied to find matching between images. This allows to make an accurate selection of building roofs removing false-positive ones and to identify their global 3D coordinates given camera internal parameters and coordinates. The last step of the image matching is based on geometrical constraints in contrast to traditional correlation. The correlation is applied only in some highly restricted areas in order to find coordinates more precisely, in such a way significantly reducing processing time of the algorithm. The algorithm has been tested on a set of Milan's aerial images and shows highly accurate results.

  15. Design of an integrated aerial image sensor

    NASA Astrophysics Data System (ADS)

    Xue, Jing; Spanos, Costas J.

    2005-05-01

    The subject of this paper is a novel integrated aerial image sensor (IAIS) system suitable for integration within the surface of an autonomous test wafer. The IAIS could be used as a lithography processing monitor, affording a "wafer's eye view" of the process, and therefore facilitating advanced process control and diagnostics without integrating (and dedicating) the sensor to the processing equipment. The IAIS is composed of an aperture mask and an array of photo-detectors. In order to retrieve nanometer scale resolution of the aerial image with a practical photo-detector pixel size, we propose a design of an aperture mask involving a series of spatial phase "moving" aperture groups. We demonstrate a design example aimed at the 65nm technology node through TEMPEST simulation. The optimized, key design parameters include an aperture width in the range of 30nm, aperture thickness in the range of 70nm, and offer a spatial resolution of about 5nm, all with comfortable fabrication tolerances. Our preliminary simulation work indicates the possibility of the IAIS being applied to the immersion lithography. A bench-top far-field experiment verifies that our approach of the spatial frequency down-shift through forming large Moire patterns is feasible.

  16. Calculation and uses of the lithographic aerial image

    NASA Astrophysics Data System (ADS)

    Flagello, Donis G.; Smith, Daniel G.

    2012-09-01

    Beginning with the seminal Dill papers of 1975, the aerial image has been essential for understanding the process of microlithography. From the aerial image, we can predict the performance of a given lithographic process in terms of depth of focus, exposure latitude, etc. As lithographic technologies improved, reaching smaller and smaller printed features, the sophistication of aerial image calculations has had to increase from simple incoherent imaging theory, to partial coherence, polarization effects, thin film effects at the resist, thick mask effects, and so on. This tutorial provides an overview and semihistorical development of the aerial image calculation and then provides a review of some of the various ways in which the aerial image is typically used to estimate the performance of the lithographic process.

  17. Increased productivity of repair verification by offline analysis of aerial images

    NASA Astrophysics Data System (ADS)

    Villa, Ernesto; Sartelli, Luca; Miyashita, Hiroyuki; Scheruebl, Thomas; Richter, Rigo; Thaler, Thomas

    2010-05-01

    Using AIMSTM to qualify repairs of defects on photomasks is the industry standard. AIMSTM provides a reasonable matching of lithographic imaging performances without the need of wafer prints. The need of utilisation of this capability by photomask manufacturers has risen due to the increased complexity of layouts incorporating aggressive RET and phase shift technologies as well as tighter specifications have pushed aerial image metrology to consider CD performance results in addition to the traditional intensity verification. The content of the paper describes the utilisation of the AIMSTM Repair Verification (RV) software for the verification of aerial images in a mask shop production environment. The software is used to analyze images from various AIMSTM tool generations and the two main routines, Multi Slice Analysis (MSA) and Image Compare (IC), are used to compare defective and non-defective areas of aerial images. It is detailed how the RV software cleans "non real" errors potentially induced by operator misjudgements, thus providing accurate and repeatable analyses all proven against the results achieved manually. A user friendly GUI drives the user through few simple, fast and safe operations and automatically provides summary tables containing all the relevant results of the analysis that can be easily exported in a proper format and sent out to the customer as a technical documentation. This results in a sensible improvement of the throughput of the printability evaluation process in a mask manufacturing environment, providing reliable analyses at a higher productivity.

  18. An algorithm for approximate rectification of digital aerial images

    Technology Transfer Automated Retrieval System (TEKTRAN)

    High-resolution aerial photography is one of the most valuable tools available for managing extensive landscapes. With recent advances in digital camera technology, computer hardware, and software, aerial photography is easier to collect, store, and transfer than ever before. Images can be automa...

  19. Aerial image retargeting (AIR): achieving litho-friendly designs

    NASA Astrophysics Data System (ADS)

    Yehia Hamouda, Ayman; Word, James; Anis, Mohab; Karim, Karim S.

    2011-04-01

    In this work, we present a new technique to detect non-Litho-Friendly design areas based on their Aerial Image signature. The aerial image is calculated for the litho target (pre-OPC). This is followed by the fixing (retargeting) the design to achieve a litho friendly OPC target. This technique is applied and tested on 28 nm metal layer and shows a big improvement in the process window performance. For an optimized Aerial-Image-Retargeting (AIR) recipe is very computationally efficient and its runtime doesn't consume more than 1% of the OPC flow runtime.

  20. Research of Active Contour Model in Aerial Images

    NASA Astrophysics Data System (ADS)

    Kun, Wang; Li, Guo

    With the development of computer and aviation technology, the aerial image is facing an important issue is how to automate, including aerial images of the automatic extraction of the target. In this paper, the issue of aerial images to study the active contour model is introduced, that is, Snake model, to achieve the target aerial image of the semi-automatic contour extraction method. Snake model used the unique characteristic of the energy minimization, carried out on the image contour extraction, to obtain a clear, consistent and accurate image contour. The model is defined through the energy minimization of the function, given in the initial position of artificial circumstances, through the iterative calculation of Snake model will eventually form the minimum energy function has been described in the outline of the target partition. The results indicate that Snake model for aerial images of the edge contour extraction, verification, concluded that the Snake-based edge detection methods could be more objectively and accurately extract the edge of the outline of aerial images.

  1. Historic Image: Aerial view of cemetery and its environs. Photograph ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    Historic Image: Aerial view of cemetery and its environs. Photograph 2 November 1961. NCA History Collection - Cypress Hills National Cemetery, Jamaica Avenue Unit, 625 Jamaica Avenue, Brooklyn, Kings County, NY

  2. HISTORIC IMAGE: AERIAL VIEW OF CEMETERY AND ITS ENVIRONS. PHOTOGRAPH ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    HISTORIC IMAGE: AERIAL VIEW OF CEMETERY AND ITS ENVIRONS. PHOTOGRAPH 15 SEPTEMBER 1950. NCA HISTORY COLLECTION. - San Francisco National Cemetery, 1 Lincoln Boulevard, San Francisco, San Francisco County, CA

  3. Historic Image: Aerial view of Mount of Victory Plot. Photograph ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    Historic Image: Aerial view of Mount of Victory Plot. Photograph 1961. NCA History Collection - Cypress Hills National Cemetery, Mount of Victory Plot Unit, 625 Jamaica Avenue, Brooklyn, Kings County, NY

  4. Remote laboratory for phase-aided 3D microscopic imaging and metrology

    NASA Astrophysics Data System (ADS)

    Wang, Meng; Yin, Yongkai; Liu, Zeyi; He, Wenqi; Li, Boqun; Peng, Xiang

    2014-05-01

    In this paper, the establishment of a remote laboratory for phase-aided 3D microscopic imaging and metrology is presented. Proposed remote laboratory consists of three major components, including the network-based infrastructure for remote control and data management, the identity verification scheme for user authentication and management, and the local experimental system for phase-aided 3D microscopic imaging and metrology. The virtual network computer (VNC) is introduced to remotely control the 3D microscopic imaging system. Data storage and management are handled through the open source project eSciDoc. Considering the security of remote laboratory, the fingerprint is used for authentication with an optical joint transform correlation (JTC) system. The phase-aided fringe projection 3D microscope (FP-3DM), which can be remotely controlled, is employed to achieve the 3D imaging and metrology of micro objects.

  5. Advanced Image Processing of Aerial Imagery

    NASA Technical Reports Server (NTRS)

    Woodell, Glenn; Jobson, Daniel J.; Rahman, Zia-ur; Hines, Glenn

    2006-01-01

    Aerial imagery of the Earth is an invaluable tool for the assessment of ground features, especially during times of disaster. Researchers at the NASA Langley Research Center have developed techniques which have proven to be useful for such imagery. Aerial imagery from various sources, including Langley's Boeing 757 Aries aircraft, has been studied extensively. This paper discusses these studies and demonstrates that better-than-observer imagery can be obtained even when visibility is severely compromised. A real-time, multi-spectral experimental system will be described and numerous examples will be shown.

  6. Wafer weak point detection based on aerial images or WLCD

    NASA Astrophysics Data System (ADS)

    Ning, Guoxiang; Philipp, Peter; Litt, Lloyd C.; Ackmann, Paul; Crell, Christian; Chen, Norman

    2015-10-01

    Aerial image measurement is a key technique for model based optical proximity correction (OPC) verification. Actual aerial images obtained by AIMS (aerial image measurement system) or WLCD (wafer level critical dimension) can detect printed wafer weak point structures in advance of wafer exposure and defect inspection. Normally, the potential wafer weak points are determined based on optical rule check (ORC) simulation in advance. However, the correlation to real wafer weak points is often not perfect due to the contribution of mask three dimension (M3D) effects, actual mask errors, and scanner lens effects. If the design weak points can accurately be detected in advance, it will reduce the wafer fab cost and improve cycle time. WLCD or AIMS tools are able to measure the aerial images CD and bossung curve through focus window. However, it is difficult to detect the wafer weak point in advance without defining selection criteria. In this study, wafer weak points sensitive to mask mean-to-nominal values are characterized for a process with very high MEEF (normally more than 4). Aerial image CD uses fixed threshold to detect the wafer weak points. By using WLCD through threshold and focus window, the efficiency of wafer weak point detection is also demonstrated. A novel method using contrast range evaluation is shown in the paper. Use of the slope of aerial images for more accurate detection of the wafer weak points using WLCD is also discussed. The contrast range can also be used to detect the wafer weak points in advance. Further, since the mean to nominal of the reticle contributes to the effective contrast range in a high MEEF area this work shows that control of the mask error is critical for high MEEF layers such as poly, active and metal layers. Wafer process based weak points that cannot be detected by wafer lithography CD or WLCD will be discussed.

  7. HISTORIC IMAGE: AERIAL VIEW OF THE CEMETERY AND ITS ENVIRONS. ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    HISTORIC IMAGE: AERIAL VIEW OF THE CEMETERY AND ITS ENVIRONS. PHOTOGRAPH TAKEN ON 6 APRIL 1968. NCA HISTORY COLLECTION. - Rock Island National Cemetery, Rock Island Arsenal, 0.25 mile north of southern tip of Rock Island, Rock Island, Rock Island County, IL

  8. A Low-Cost Imaging System for Aerial Applicators

    Technology Transfer Automated Retrieval System (TEKTRAN)

    Agricultural aircraft provide a readily available and versatile platform for airborne remote sensing. Although various airborne imaging systems are being used for research and commercial applications, most of these systems are either too expensive or too complex to be of practical use for aerial app...

  9. 3D spectral imaging system for anterior chamber metrology

    NASA Astrophysics Data System (ADS)

    Anderson, Trevor; Segref, Armin; Frisken, Grant; Frisken, Steven

    2015-03-01

    Accurate metrology of the anterior chamber of the eye is useful for a number of diagnostic and clinical applications. In particular, accurate corneal topography and corneal thickness data is desirable for fitting contact lenses, screening for diseases and monitoring corneal changes. Anterior OCT systems can be used to measure anterior chamber surfaces, however accurate curvature measurements for single point scanning systems are known to be very sensitive to patient movement. To overcome this problem we have developed a parallel 3D spectral metrology system that captures simultaneous A-scans on a 2D lateral grid. This approach enables estimates of the elevation and curvature of anterior and posterior corneal surfaces that are robust to sample movement. Furthermore, multiple simultaneous surface measurements greatly improve the ability to register consecutive frames and enable aggregate measurements over a finer lateral grid. A key element of our approach has been to exploit standard low cost optical components including lenslet arrays and a 2D sensor to provide a path towards low cost implementation. We demonstrate first prototypes based on 6 Mpixel sensor using a 250 μm pitch lenslet array with 300 sample beams to achieve an RMS elevation accuracy of 1μm with 95 dB sensitivity and a 7.0 mm range. Initial tests on Porcine eyes, model eyes and calibration spheres demonstrate the validity of the concept. With the next iteration of designs we expect to be able to achieve over 1000 simultaneous A-scans in excess of 75 frames per second.

  10. An improved dehazing algorithm of aerial high-definition image

    NASA Astrophysics Data System (ADS)

    Jiang, Wentao; Ji, Ming; Huang, Xiying; Wang, Chao; Yang, Yizhou; Li, Tao; Wang, Jiaoying; Zhang, Ying

    2016-01-01

    For unmanned aerial vehicle(UAV) images, the sensor can not get high quality images due to fog and haze weather. To solve this problem, An improved dehazing algorithm of aerial high-definition image is proposed. Based on the model of dark channel prior, the new algorithm firstly extracts the edges from crude estimated transmission map and expands the extracted edges. Then according to the expended edges, the algorithm sets a threshold value to divide the crude estimated transmission map into different areas and makes different guided filter on the different areas compute the optimized transmission map. The experimental results demonstrate that the performance of the proposed algorithm is substantially the same as the one based on dark channel prior and guided filter. The average computation time of the new algorithm is around 40% of the one as well as the detection ability of UAV image is improved effectively in fog and haze weather.

  11. CMOS Imaging Sensor Technology for Aerial Mapping Cameras

    NASA Astrophysics Data System (ADS)

    Neumann, Klaus; Welzenbach, Martin; Timm, Martin

    2016-06-01

    In June 2015 Leica Geosystems launched the first large format aerial mapping camera using CMOS sensor technology, the Leica DMC III. This paper describes the motivation to change from CCD sensor technology to CMOS for the development of this new aerial mapping camera. In 2002 the DMC first generation was developed by Z/I Imaging. It was the first large format digital frame sensor designed for mapping applications. In 2009 Z/I Imaging designed the DMC II which was the first digital aerial mapping camera using a single ultra large CCD sensor to avoid stitching of smaller CCDs. The DMC III is now the third generation of large format frame sensor developed by Z/I Imaging and Leica Geosystems for the DMC camera family. It is an evolution of the DMC II using the same system design with one large monolithic PAN sensor and four multi spectral camera heads for R,G, B and NIR. For the first time a 391 Megapixel large CMOS sensor had been used as PAN chromatic sensor, which is an industry record. Along with CMOS technology goes a range of technical benefits. The dynamic range of the CMOS sensor is approx. twice the range of a comparable CCD sensor and the signal to noise ratio is significantly better than with CCDs. Finally results from the first DMC III customer installations and test flights will be presented and compared with other CCD based aerial sensors.

  12. Improved land cover mapping using aerial photographs and satellite images

    NASA Astrophysics Data System (ADS)

    Varga, Katalin; Szabó, Szilárd; Szabó, Gergely; Dévai, György; Tóthmérész, Béla

    2014-10-01

    Manual Land Cover Mapping using aerial photographs provides sufficient level of resolution for detailed vegetation or land cover maps. However, in some cases it is not possible to achieve the desired information over large areas, for example from historical data where the quality and amount of available images is definitely lower than from modern data. The use of automated and semiautomated methods offers the means to identify the vegetation cover using remotely sensed data. In this paper automated methods were tested on aerial photographs and satellite images to extract better and more reliable information about vegetation cover. These testswere performed by using automated analysis of LANDSAT7 images (with and without the surface model of the Shuttle Radar Topography Mission (SRTM)) and two temporally similar aerial photographs. The spectral bands were analyzed with supervised (maximum likelihood) methods. In conclusion, the SRTM and the combination of two temporally similar aerial photographs from earlier years were useful in separating the vegetation cover on a floodplain area. In addition the different date of the vegetation season also gave reliable information about the land cover. High quality information about old and present vegetation on a large area is an essential prerequisites ensuring the conservation of ecosystems

  13. An image-processing software package: UU and Fig for optical metrology applications

    NASA Astrophysics Data System (ADS)

    Chen, Lujie

    2013-06-01

    Modern optical metrology applications are largely supported by computational methods, such as phase shifting [1], Fourier Transform [2], digital image correlation [3], camera calibration [4], etc, in which image processing is a critical and indispensable component. While it is not too difficult to obtain a wide variety of image-processing programs from the internet; few are catered for the relatively special area of optical metrology. This paper introduces an image-processing software package: UU (data processing) and Fig (data rendering) that incorporates many useful functions to process optical metrological data. The cross-platform programs UU and Fig are developed based on wxWidgets. At the time of writing, it has been tested on Windows, Linux and Mac OS. The userinterface is designed to offer precise control of the underline processing procedures in a scientific manner. The data input/output mechanism is designed to accommodate diverse file formats and to facilitate the interaction with other independent programs. In terms of robustness, although the software was initially developed for personal use, it is comparably stable and accurate to most of the commercial software of similar nature. In addition to functions for optical metrology, the software package has a rich collection of useful tools in the following areas: real-time image streaming from USB and GigE cameras, computational geometry, computer vision, fitting of data, 3D image processing, vector image processing, precision device control (rotary stage, PZT stage, etc), point cloud to surface reconstruction, volume rendering, batch processing, etc. The software package is currently used in a number of universities for teaching and research.

  14. D City Transformations by Time Series of Aerial Images

    NASA Astrophysics Data System (ADS)

    Adami, A.

    2015-02-01

    Recent photogrammetric applications, based on dense image matching algorithms, allow to use not only images acquired by digital cameras, amateur or not, but also to recover the vast heritage of analogue photographs. This possibility opens up many possibilities in the use and enhancement of existing photos heritage. The research of the original figuration of old buildings, the virtual reconstruction of disappeared architectures and the study of urban development are some of the application areas that exploit the great cultural heritage of photography. Nevertheless there are some restrictions in the use of historical images for automatic reconstruction of buildings such as image quality, availability of camera parameters and ineffective geometry of image acquisition. These constrains are very hard to solve and it is difficult to discover good dataset in the case of terrestrial close range photogrammetry for the above reasons. Even the photographic archives of museums and superintendence, while retaining a wealth of documentation, have no dataset for a dense image matching approach. Compared to the vast collection of historical photos, the class of aerial photos meets both criteria stated above. In this paper historical aerial photographs are used with dense image matching algorithms to realize 3d models of a city in different years. The models can be used to study the urban development of the city and its changes through time. The application relates to the city centre of Verona, for which some time series of aerial photographs have been retrieved. The models obtained in this way allowed, right away, to observe the urban development of the city, the places of expansion and new urban areas. But a more interesting aspect emerged from the analytical comparison between models. The difference, as the Euclidean distance, between two models gives information about new buildings or demolitions. As considering accuracy it is necessary point out that the quality of final

  15. Multiple-order imaging for optical critical dimension metrology using microscope characterization

    NASA Astrophysics Data System (ADS)

    Qin, Jing; Zhou, Hui; Barnes, Bryan M.; Goasmat, Francois; Dixson, Ronald; Silver, Richard M.

    2012-10-01

    There has been much recent work in developing advanced optical metrology applications that use imaging optics for optical critical dimension (OCD) measurements, defect detection, and for potential use with in-die metrology applications. We have previously reported quantitative measurements for sub-50 nm CD dense arrays which scatter only the 0th-order specular diffraction component using angle-resolved scatterfield microscopy. Through angle-resolved and focus-resolved imaging, we now measure OCD targets with three-dimensional scattered fields that contain multiple Fourier frequencies. Experimental sensitivity to nanometer scale linewidth changes is presented, supported by simulation studies. A new, more advanced approach to tool normalization is coupled with rigorous electromagnetic simulations and library based regression fitting that potentially enables OCD measurements with sub-nanometer uncertainties for targets that scatter multiple Fourier frequencies.

  16. Detection of Aspens Using High Resolution Aerial Laser Scanning Data and Digital Aerial Images

    PubMed Central

    Säynäjoki, Raita; Packalén, Petteri; Maltamo, Matti; Vehmas, Mikko; Eerikäinen, Kalle

    2008-01-01

    The aim was to use high resolution Aerial Laser Scanning (ALS) data and aerial images to detect European aspen (Populus tremula L.) from among other deciduous trees. The field data consisted of 14 sample plots of 30 m × 30 m size located in the Koli National Park in the North Karelia, Eastern Finland. A Canopy Height Model (CHM) was interpolated from the ALS data with a pulse density of 3.86/m2, low-pass filtered using Height-Based Filtering (HBF) and binarized to create the mask needed to separate the ground pixels from the canopy pixels within individual areas. Watershed segmentation was applied to the low-pass filtered CHM in order to create preliminary canopy segments, from which the non-canopy elements were extracted to obtain the final canopy segmentation, i.e. the ground mask was analysed against the canopy mask. A manual classification of aerial images was employed to separate the canopy segments of deciduous trees from those of coniferous trees. Finally, linear discriminant analysis was applied to the correctly classified canopy segments of deciduous trees to classify them into segments belonging to aspen and those belonging to other deciduous trees. The independent variables used in the classification were obtained from the first pulse ALS point data. The accuracy of discrimination between aspen and other deciduous trees was 78.6%. The independent variables in the classification function were the proportion of vegetation hits, the standard deviation of in pulse heights, accumulated intensity at the 90th percentile and the proportion of laser points reflected at the 60th height percentile. The accuracy of classification corresponded to the validation results of earlier ALS-based studies on the classification of individual deciduous trees to tree species.

  17. a Fast Approach for Stitching of Aerial Images

    NASA Astrophysics Data System (ADS)

    Moussa, A.; El-Sheimy, N.

    2016-06-01

    The last few years have witnessed an increasing volume of aerial image data because of the extensive improvements of the Unmanned Aerial Vehicles (UAVs). These newly developed UAVs have led to a wide variety of applications. A fast assessment of the achieved coverage and overlap of the acquired images of a UAV flight mission is of great help to save the time and cost of the further steps. A fast automatic stitching of the acquired images can help to visually assess the achieved coverage and overlap during the flight mission. This paper proposes an automatic image stitching approach that creates a single overview stitched image using the acquired images during a UAV flight mission along with a coverage image that represents the count of overlaps between the acquired images. The main challenge of such task is the huge number of images that are typically involved in such scenarios. A short flight mission with image acquisition frequency of one second can capture hundreds to thousands of images. The main focus of the proposed approach is to reduce the processing time of the image stitching procedure by exploiting the initial knowledge about the images positions provided by the navigation sensors. The proposed approach also avoids solving for all the transformation parameters of all the photos together to save the expected long computation time if all the parameters were considered simultaneously. After extracting the points of interest of all the involved images using Scale-Invariant Feature Transform (SIFT) algorithm, the proposed approach uses the initial image's coordinates to build an incremental constrained Delaunay triangulation that represents the neighborhood of each image. This triangulation helps to match only the neighbor images and therefore reduces the time-consuming features matching step. The estimated relative orientation between the matched images is used to find a candidate seed image for the stitching process. The pre-estimated transformation

  18. Orientation-selective building detection in aerial images

    NASA Astrophysics Data System (ADS)

    Manno-Kovacs, Andrea; Sziranyi, Tamas

    2015-10-01

    This paper introduces a novel aerial building detection method based on region orientation as a new feature, which is used in various steps throughout the presented framework. As building objects are expected to be connected with each other on a regional level, exploiting the main orientation obtained from the local gradient analysis provides further information for detection purposes. The orientation information is applied for an improved edge map design, which is integrated with classical features like shadow and color. Moreover, an orthogonality check is introduced for finding building candidates, and their final shapes defined by the Chan-Vese active contour algorithm are refined based on the orientation information, resulting in smooth and accurate building outlines. The proposed framework is evaluated on multiple data sets, including aerial and high resolution optical satellite images, and compared to six state-of-the-art methods in both object and pixel level evaluation, proving the algorithm's efficiency.

  19. Evaluation of Selected Features for CAR Detection in Aerial Images

    NASA Astrophysics Data System (ADS)

    Tuermer, S.; Leitloff, J.; Reinartz, P.; Stilla, U.

    2011-09-01

    The extraction of vehicles from aerial images provides a wide area traffic situation within a short time. Applications for the gathered data are various and reach from smart routing in the case of congestions to usability validation of roads in the case of disasters. The challenge of the vehicle detection task is finding adequate features which are capable to separate cars from other objects; especially those that look similar. We present an experiment where selected features show their ability of car detection. Precisely, Haar-like and HoG features are utilized and passed to the AdaBoost algorithm for calculating the final detector. Afterwards the classifying power of the features is accurately analyzed and evaluated. The tests a carried out on aerial data from the inner city of Munich, Germany and include small inner city roads with rooftops close by which raise the complexity factor.

  20. An automatic high precision registration method between large area aerial images and aerial light detection and ranging data

    NASA Astrophysics Data System (ADS)

    Du, Q.; Xie, D.; Sun, Y.

    2015-06-01

    The integration of digital aerial photogrammetry and Light Detetion And Ranging (LiDAR) is an inevitable trend in Surveying and Mapping field. We calculate the external orientation elements of images which identical with LiDAR coordinate to realize automatic high precision registration between aerial images and LiDAR data. There are two ways to calculate orientation elements. One is single image spatial resection using image matching 3D points that registered to LiDAR. The other one is Position and Orientation System (POS) data supported aerotriangulation. The high precision registration points are selected as Ground Control Points (GCPs) instead of measuring GCPs manually during aerotriangulation. The registration experiments indicate that the method which registering aerial images and LiDAR points has a great advantage in higher automation and precision compare with manual registration.

  1. Fitting of Parametric Building Models to Oblique Aerial Images

    NASA Astrophysics Data System (ADS)

    Panday, U. S.; Gerke, M.

    2011-09-01

    In literature and in photogrammetric workstations many approaches and systems to automatically reconstruct buildings from remote sensing data are described and available. Those building models are being used for instance in city modeling or in cadastre context. If a roof overhang is present, the building walls cannot be estimated correctly from nadir-view aerial images or airborne laser scanning (ALS) data. This leads to inconsistent building outlines, which has a negative influence on visual impression, but more seriously also represents a wrong legal boundary in the cadaster. Oblique aerial images as opposed to nadir-view images reveal greater detail, enabling to see different views of an object taken from different directions. Building walls are visible from oblique images directly and those images are used for automated roof overhang estimation in this research. A fitting algorithm is employed to find roof parameters of simple buildings. It uses a least squares algorithm to fit projected wire frames to their corresponding edge lines extracted from the images. Self-occlusion is detected based on intersection result of viewing ray and the planes formed by the building whereas occlusion from other objects is detected using an ALS point cloud. Overhang and ground height are obtained by sweeping vertical and horizontal planes respectively. Experimental results are verified with high resolution ortho-images, field survey, and ALS data. Planimetric accuracy of 1cm mean and 5cm standard deviation was obtained, while buildings' orientation were accurate to mean of 0.23° and standard deviation of 0.96° with ortho-image. Overhang parameters were aligned to approximately 10cm with field survey. The ground and roof heights were accurate to mean of - 9cm and 8cm with standard deviations of 16cm and 8cm with ALS respectively. The developed approach reconstructs 3D building models well in cases of sufficient texture. More images should be acquired for completeness of

  2. a New Paradigm for Matching - and Aerial Images

    NASA Astrophysics Data System (ADS)

    Koch, T.; Zhuo, X.; Reinartz, P.; Fraundorfer, F.

    2016-06-01

    This paper investigates the performance of SIFT-based image matching regarding large differences in image scaling and rotation, as this is usually the case when trying to match images captured from UAVs and airplanes. This task represents an essential step for image registration and 3d-reconstruction applications. Various real world examples presented in this paper show that SIFT, as well as A-SIFT perform poorly or even fail in this matching scenario. Even if the scale difference in the images is known and eliminated beforehand, the matching performance suffers from too few feature point detections, ambiguous feature point orientations and rejection of many correct matches when applying the ratio-test afterwards. Therefore, a new feature matching method is provided that overcomes these problems and offers thousands of matches by a novel feature point detection strategy, applying a one-to-many matching scheme and substitute the ratio-test by adding geometric constraints to achieve geometric correct matches at repetitive image regions. This method is designed for matching almost nadir-directed images with low scene depth, as this is typical in UAV and aerial image matching scenarios. We tested the proposed method on different real world image pairs. While standard SIFT failed for most of the datasets, plenty of geometrical correct matches could be found using our approach. Comparing the estimated fundamental matrices and homographies with ground-truth solutions, mean errors of few pixels can be achieved.

  3. Error Estimation Techniques to Refine Overlapping Aerial Image Mosaic Processes via Detected Parameters

    ERIC Educational Resources Information Center

    Bond, William Glenn

    2012-01-01

    In this paper, I propose to demonstrate a means of error estimation preprocessing in the assembly of overlapping aerial image mosaics. The mosaic program automatically assembles several hundred aerial images from a data set by aligning them, via image registration using a pattern search method, onto a GIS grid. The method presented first locates…

  4. GPU accelerated Monte-Carlo simulation of SEM images for metrology

    NASA Astrophysics Data System (ADS)

    Verduin, T.; Lokhorst, S. R.; Hagen, C. W.

    2016-03-01

    In this work we address the computation times of numerical studies in dimensional metrology. In particular, full Monte-Carlo simulation programs for scanning electron microscopy (SEM) image acquisition are known to be notoriously slow. Our quest in reducing the computation time of SEM image simulation has led us to investigate the use of graphics processing units (GPUs) for metrology. We have succeeded in creating a full Monte-Carlo simulation program for SEM images, which runs entirely on a GPU. The physical scattering models of this GPU simulator are identical to a previous CPU-based simulator, which includes the dielectric function model for inelastic scattering and also refinements for low-voltage SEM applications. As a case study for the performance, we considered the simulated exposure of a complex feature: an isolated silicon line with rough sidewalls located on a at silicon substrate. The surface of the rough feature is decomposed into 408 012 triangles. We have used an exposure dose of 6 mC/cm2, which corresponds to 6 553 600 primary electrons on average (Poisson distributed). We repeat the simulation for various primary electron energies, 300 eV, 500 eV, 800 eV, 1 keV, 3 keV and 5 keV. At first we run the simulation on a GeForce GTX480 from NVIDIA. The very same simulation is duplicated on our CPU-based program, for which we have used an Intel Xeon X5650. Apart from statistics in the simulation, no difference is found between the CPU and GPU simulated results. The GTX480 generates the images (depending on the primary electron energy) 350 to 425 times faster than a single threaded Intel X5650 CPU. Although this is a tremendous speedup, we actually have not reached the maximum throughput because of the limited amount of available memory on the GTX480. Nevertheless, the speedup enables the fast acquisition of simulated SEM images for metrology. We now have the potential to investigate case studies in CD-SEM metrology, which otherwise would take unreasonable

  5. MO-G-12A-01: Quantitative Imaging Metrology: What Should Be Assessed and How?

    SciTech Connect

    Giger, M; Petrick, N; Obuchowski, N; Kinahan, P

    2014-06-15

    The first two symposia in the Quantitative Imaging Track focused on 1) the introduction of quantitative imaging (QI) challenges and opportunities, and QI efforts of agencies and organizations such as the RSNA, NCI, FDA, and NIST, and 2) the techniques, applications, and challenges of QI, with specific examples from CT, PET/CT, and MR. This third symposium in the QI Track will focus on metrology and its importance in successfully advancing the QI field. While the specific focus will be on QI, many of the concepts presented are more broadly applicable to many areas of medical physics research and applications. As such, the topics discussed should be of interest to medical physicists involved in imaging as well as therapy. The first talk of the session will focus on the introduction to metrology and why it is critically important in QI. The second talk will focus on appropriate methods for technical performance assessment. The third talk will address statistically valid methods for algorithm comparison, a common problem not only in QI but also in other areas of medical physics. The final talk in the session will address strategies for publication of results that will allow statistically valid meta-analyses, which is critical for combining results of individual studies with typically small sample sizes in a manner that can best inform decisions and advance the field. Learning Objectives: Understand the importance of metrology in the QI efforts. Understand appropriate methods for technical performance assessment. Understand methods for comparing algorithms with or without reference data (i.e., “ground truth”). Understand the challenges and importance of reporting results in a manner that allows for statistically valid meta-analyses.

  6. Vision ray calibration for the quantitative geometric description of general imaging and projection optics in metrology

    SciTech Connect

    Bothe, Thorsten; Li Wansong; Schulte, Michael; von Kopylow, Christoph; Bergmann, Ralf B.; Jueptner, Werner P. O.

    2010-10-20

    Exact geometric calibration of optical devices like projectors or cameras is the basis for utilizing them in quantitative metrological applications. The common state-of-the-art photogrammetric pinhole-imaging-based models with supplemental polynomial corrections fail in the presence of nonsymmetric or high-spatial-frequency distortions and in describing caustics efficiently. These problems are solved by our vision ray calibration (VRC), which is proposed in this paper. The VRC takes an optical mapping system modeled as a black box and directly delivers corresponding vision rays for each mapped pixel. The underlying model, the calibration process, and examples are visualized and reviewed, demonstrating the potential of the VRC.

  7. Direct Penguin Counting Using Unmanned Aerial Vehicle Image

    NASA Astrophysics Data System (ADS)

    Hyun, C. U.; Kim, H. C.; Kim, J. H.; Hong, S. G.

    2015-12-01

    This study presents an application of unmanned aerial vehicle (UAV) images to monitor penguin colony in Baton Peninsula, King George Island, Antarctica. The area around Narębski Point located on the southeast coast of Barton Peninsula was designated as Antarctic Specially Protected Area No. 171 (ASPA 171), and Chinstrap and Gentoo penguins inhabit in this area. The UAV images were acquired in a part of ASPA 171 from four flights in a single day, Jan 18, 2014. About 360 images were mosaicked as an image of about 3 cm spatial resolution and then a subset including representative penguin rookeries was selected. The subset image was segmented based on gradient map of pixel values, and spectral and spatial attributes were assigned to each segment. The object based image analysis (OBIA) was conducted with consideration of spectral attributes including mean and minimum values of each segment and various shape attributes such as area, length, compactness and roundness to detect individual penguin. The segments indicating individual penguin were effectively detected on rookeries with high contrasts in the spectral and shape attributes. The importance of periodic and precise monitoring of penguins has been recognized because variations of their populations reflect environmental changes and disturbance from human activities. Utilization of very high resolution imaging method shown in this study can be applied to other penguin habitats in Antarctica, and the results will be able to support establishing effective environmental management plans.

  8. Camera model and calibration process for high-accuracy digital image metrology of inspection planes

    NASA Astrophysics Data System (ADS)

    Correia, Bento A. B.; Dinis, Joao

    1998-10-01

    High accuracy digital image based metrology must rely on an integrated model of image generation that is able to consider simultaneously the geometry of the camera vs. object positioning, and the conversion of the optical image on the sensor into an electronic digital format. In applications of automated visual inspection involving the analysis of approximately plane objects these models are generally simplified in order to facilitate the process of camera calibration. In this context, the lack of rigor in the determination of the intrinsic parameters in such models is particularly relevant. Aiming at the high accuracy metrology of contours of objects lying on an analysis plane, and involving sub-pixel measurements, this paper presents a three-stage camera model that includes an extrinsic component of perspective distortion and the intrinsic components of radial lens distortion and sensor misalignment. The later two factors are crucial in applications of machine vision that rely on the use of low cost optical components. A polynomial model for the negative radial lens distortion of wide field of view CCTV lenses is also established.

  9. Multi-colour microscopic interferometry for optical metrology and imaging applications

    NASA Astrophysics Data System (ADS)

    Upputuri, Paul Kumar; Pramanik, Manojit; Nandigana, Krishna Mohan; Kothiyal, Mahendra Prasad

    2016-09-01

    Interferometry has been widely used for optical metrology and imaging applications because of their precision, reliability, and versatility. Although single-wavelength interferometery can provide high sensitivity and resolution, it has several drawbacks, namely, it fails to quantify large-discontinuities, large-deformations, and shape of unpolished surfaces. Multiple-wavelength techniques have been successfully used to overcome the drawbacks associated with single wavelength analysis. The use of colour CCD camera allows simultaneous acquisition of multiple interferograms. The advances in colour CCD cameras and image processing techniques have made the multi-colour interferometry a faster, simpler, and cost-effective tool for industrial applications. This article reviews the recent advances in multi-colour interferometric techniques and their demanding applications for characterization of micro-systems, non-destructive testing, and bio-imaging applications.

  10. Oblique Aerial Images and Their Use in Cultural Heritage Documentation

    NASA Astrophysics Data System (ADS)

    Höhle, J.

    2013-07-01

    Oblique images enable three-dimensional (3d) modelling of objects with vertical dimensions. Such imagery is nowadays systematically taken of cities and may easily become available. The documentation of cultural heritage can take advantage of these sources of information. Two new oblique camera systems are presented and characteristics of such images are summarized. A first example uses images of a new multi-camera system for the derivation of orthoimages, façade plots with photo texture, 3d scatter plots, and dynamic 3d models of a historic church. The applied methodology is based on automatically derived point clouds of high density. Each point will be supplemented with colour and other attributes. The problems experienced in these processes and the solutions to these problems are presented. The applied tools are a combination of professional tools, free software, and of own software developments. Special attention is given to the quality of input images. Investigations are carried out on edges in the images. The combination of oblique and nadir images enables new possibilities in the processing. The use of the near-infrared channel besides the red, green, and blue channel of the applied multispectral imagery is also of advantage. Vegetation close to the object of interest can easily be removed. A second example describes the modelling of a monument by means of a non-metric camera and a standard software package. The presented results regard achieved geometric accuracy and image quality. It is concluded that the use of oblique aerial images together with image-based processing methods yield new possibilities of economic and accurate documentation of tall monuments.

  11. Initial Efforts toward Mission-Representative Imaging Surveys from Aerial Explorers

    NASA Technical Reports Server (NTRS)

    Pisanich, Greg; Plice, Laura; Ippolito, Corey; Young, Larry A.; Lau, Benton; Lee, Pascal

    2004-01-01

    Numerous researchers have proposed the use of robotic aerial explorers to perform scientific investigation of planetary bodies in our solar system. One of the essential tasks for any aerial explorer is to be able to perform scientifically valuable imaging surveys. The focus of this paper is to discuss the challenges implicit in, and recent observations related to, acquiring mission-representative imaging data from a small fixed-wing UAV, acting as a surrogate planetary aerial explorer. This question of successfully performing aerial explorer surveys is also tied to other topics of technical investigation, including the development of unique bio-inspired technologies.

  12. Application of Digital Image Correlation Method to Improve the Accuracy of Aerial Photo Stitching

    NASA Astrophysics Data System (ADS)

    Tung, Shih-Heng; Jhou, You-Liang; Shih, Ming-Hsiang; Hsiao, Han-Wei; Sung, Wen-Pei

    2016-04-01

    Satellite images and traditional aerial photos have been used in remote sensing for a long time. However, there are some problems with these images. For example, the resolution of satellite image is insufficient, the cost to obtain traditional images is relatively high and there is also human safety risk in traditional flight. These result in the application limitation of these images. In recent years, the control technology of unmanned aerial vehicle (UAV) is rapidly developed. This makes unmanned aerial vehicle widely used in obtaining aerial photos. Compared to satellite images and traditional aerial photos, these aerial photos obtained using UAV have the advantages of higher resolution, low cost. Because there is no crew in UAV, it is still possible to take aerial photos using UAV under unstable weather conditions. Images have to be orthorectified and their distortion must be corrected at first. Then, with the help of image matching technique and control points, these images can be stitched or used to establish DEM of ground surface. These images or DEM data can be used to monitor the landslide or estimate the volume of landslide. For the image matching, we can use such as Harris corner method, SIFT or SURF to extract and match feature points. However, the accuracy of these methods for matching is about pixel or sub-pixel level. The accuracy of digital image correlation method (DIC) during image matching can reach about 0.01pixel. Therefore, this study applies digital image correlation method to match extracted feature points. Then the stitched images are observed to judge the improvement situation. This study takes the aerial photos of a reservoir area. These images are stitched under the situations with and without the help of DIC. The results show that the misplacement situation in the stitched image using DIC to match feature points has been significantly improved. This shows that the use of DIC to match feature points can actually improve the accuracy of

  13. High-resolution EUV imaging tools for resist exposure and aerial image monitoring

    NASA Astrophysics Data System (ADS)

    Booth, M.; Brisco, O.; Brunton, A.; Cashmore, J.; Elbourn, P.; Elliner, G.; Gower, M.; Greuters, J.; Grunewald, P.; Gutierrez, R.; Hill, T.; Hirsch, J.; Kling, L.; McEntee, N.; Mundair, S.; Richards, P.; Truffert, V.; Wallhead, I.; Whitfield, M.; Hudyma, R.

    2005-05-01

    Key features are presented of two high-resolution EUV imaging tools: the MS-13 Microstepper wafer exposure and the RIM-13 reticle imaging microscope. The MS-13 has been developed for EUV resist testing and technology evaluation at the 32nm node and beyond, while the RIM-13 is designed for actinic aerial image monitoring of blank and patterned EUV reticles. Details of the design architecture, module layout, major subsystems and performance are presented for both tools.

  14. Semantic Segmentation of Aerial Images with AN Ensemble of Cnns

    NASA Astrophysics Data System (ADS)

    Marmanis, D.; Wegner, J. D.; Galliani, S.; Schindler, K.; Datcu, M.; Stilla, U.

    2016-06-01

    This paper describes a deep learning approach to semantic segmentation of very high resolution (aerial) images. Deep neural architectures hold the promise of end-to-end learning from raw images, making heuristic feature design obsolete. Over the last decade this idea has seen a revival, and in recent years deep convolutional neural networks (CNNs) have emerged as the method of choice for a range of image interpretation tasks like visual recognition and object detection. Still, standard CNNs do not lend themselves to per-pixel semantic segmentation, mainly because one of their fundamental principles is to gradually aggregate information over larger and larger image regions, making it hard to disentangle contributions from different pixels. Very recently two extensions of the CNN framework have made it possible to trace the semantic information back to a precise pixel position: deconvolutional network layers undo the spatial downsampling, and Fully Convolution Networks (FCNs) modify the fully connected classification layers of the network in such a way that the location of individual activations remains explicit. We design a FCN which takes as input intensity and range data and, with the help of aggressive deconvolution and recycling of early network layers, converts them into a pixelwise classification at full resolution. We discuss design choices and intricacies of such a network, and demonstrate that an ensemble of several networks achieves excellent results on challenging data such as the ISPRS semantic labeling benchmark, using only the raw data as input.

  15. Technology review for silicon imagers-based see-through-silicon inspection and metrology

    NASA Astrophysics Data System (ADS)

    Zhou, Wei; Guest, Max; Hart, Darcy

    2012-03-01

    Semiconductor see-through-silicon metrology and inspection applications use traditionally InGaAs based cameras due to perfect spectral sensitivity. But InGaAs cameras do not carry equivalent advantages as Silicon based imagers such as pixel size, pixel array resolution and through-put etc. This paper first reviews the novel technologies which dramatically enhance silicon imagers' sensitivity for this see-through silicon application. Inspection through-put is analyzed based on multiple system implementation:, start-stop scan mode vs. continuous scan mode, 2D cameras vs. TDI line scan cameras, against to traditional InGaAs camera based continuous scan platform. The simulation data shows that systematic through-put based on 2D silicon cameras can be competitive to today's InGaAs system, while TDI line scan system can be much faster than system based on near future's high resolution and high speed InGaAs cameras.

  16. Monte Carlo simulation of CD-SEM images for linewidth and critical dimension metrology.

    PubMed

    Li, Y G; Zhang, P; Ding, Z J

    2013-01-01

    In semiconductor industry, strict critical dimension control by using a critical dimension scanning electron microscope (CD-SEM) is an extremely urgent task in near-term years. A Monte Carlo simulation model for study of CD-SEM image has been established, which is based on using Mott's cross section for electron elastic scattering and the full Penn dielectric function formalism for electron inelastic scattering and the associated secondary electron (SE) production. In this work, a systematic calculation of CD-SEM line-scan profiles and 2D images of trapezoidal Si lines has been performed by taking into account different experimental factors including electron beam condition (primary energy, probe size), line geometry (width, height, foot/corner rounding, sidewall angle, and roughness), material properties, and SE signal detection. The influences of these factors to the critical dimension metrology are investigated, leading to build a future comprehensive model-based library. PMID:22887037

  17. Grab a coffee: your aerial images are already analyzed

    NASA Astrophysics Data System (ADS)

    Garetto, Anthony; Rademacher, Thomas; Schulz, Kristian

    2015-07-01

    For over 2 decades the AIMTM platform has been utilized in mask shops as the standard for actinic review of photomask sites in order to perform defect disposition and repair review. Throughout this time the measurement throughput of the systems has been improved in order to keep pace with the requirements demanded by a manufacturing environment, however the analysis of the sites captured has seen little improvement and remained a manual process. This manual analysis of aerial images is time consuming, subject to error and unreliability and contributes to holding up turn-around time (TAT) and slowing process flow in a manufacturing environment. AutoAnalysis, the first application available for the FAVOR® platform, offers a solution to these problems by providing fully automated data transfer and analysis of AIMTM aerial images. The data is automatically output in a customizable format that can be tailored to your internal needs and the requests of your customers. Savings in terms of operator time arise from the automated analysis which no longer needs to be performed. Reliability is improved as human error is eliminated making sure the most defective region is always and consistently captured. Finally the TAT is shortened and process flow for the back end of the line improved as the analysis is fast and runs in parallel to the measurements. In this paper the concept and approach of AutoAnalysis will be presented as well as an update to the status of the project. A look at the benefits arising from the automation and the customizable approach of the solution will be shown.

  18. An improved algorithm of mask image dodging for aerial image

    NASA Astrophysics Data System (ADS)

    Zhang, Zuxun; Zou, Songbai; Zuo, Zhiqi

    2011-12-01

    The technology of Mask image dodging based on Fourier transform is a good algorithm in removing the uneven luminance within a single image. At present, the difference method and the ratio method are the methods in common use, but they both have their own defects .For example, the difference method can keep the brightness uniformity of the whole image, but it is deficient in local contrast; meanwhile the ratio method can work better in local contrast, but sometimes it makes the dark areas of the original image too bright. In order to remove the defects of the two methods effectively, this paper on the basis of research of the two methods proposes a balance solution. Experiments show that the scheme not only can combine the advantages of the difference method and the ratio method, but also can avoid the deficiencies of the two algorithms.

  19. Coastline Extraction from Aerial Images Based on Edge Detection

    NASA Astrophysics Data System (ADS)

    Paravolidakis, V.; Moirogiorgou, K.; Ragia, L.; Zervakis, M.; Synolakis, C.

    2016-06-01

    Nowadays coastline extraction and tracking of its changes become of high importance because of the climate change, global warming and rapid growth of human population. Coastal areas play a significant role for the economy of the entire region. In this paper we propose a new methodology for automatic extraction of the coastline using aerial images. A combination of a four step algorithm is used to extract the coastline in a robust and generalizable way. First, noise distortion is reduced in order to ameliorate the input data for the next processing steps. Then, the image is segmented into two regions, land and sea, through the application of a local threshold to create the binary image. The result is further processed by morphological operators with the aim that small objects are being eliminated and only the objects of interest are preserved. Finally, we perform edge detection and active contours fitting in order to extract and model the coastline. These algorithmic steps are illustrated through examples, which demonstrate the efficacy of the proposed methodology.

  20. Volumetric rendering and metrology of spherical gradient refractive index lens imaged by angular scan optical coherence tomography system.

    PubMed

    Yao, Jianing; Thompson, Kevin P; Ma, Bin; Ponting, Michael; Rolland, Jannick P

    2016-08-22

    In this paper, we develop the methodology, including the refraction correction, geometrical thickness correction, coordinate transformation, and layer segmentation algorithms, for 3D rendering and metrology of a layered spherical gradient refractive index (S-GRIN) lens based on the imaging data collected by an angular scan optical coherence tomography (OCT) system. The 3D mapping and rendering enables direct 3D visualization and internal defect inspection of the lens. The metrology provides assessment of the surface geometry, the lens thickness, the radii of curvature of the internal layer interfaces, and the misalignment of the internal S-GRIN distribution with respect to the lens surface. The OCT metrology results identify the manufacturing defects, and enable targeted process development for optimizing the manufacturing parameters. The newly fabricated S-GRIN lenses show up to a 7x spherical aberration reduction that allows a significantly increased utilizable effective aperture. PMID:27557217

  1. Using aerial photography and image analysis to measure changes in giant reed populations

    Technology Transfer Automated Retrieval System (TEKTRAN)

    A study was conducted along the Rio Grande in southwest Texas to evaluate color-infrared aerial photography combined with supervised image analysis to quantify changes in giant reed (Arundo donax L.) populations over a 6-year period. Aerial photographs from 2002 and 2008 of the same seven study site...

  2. Exact and reliable overlay metrology in nanoscale semiconductor devices using an image processing method

    NASA Astrophysics Data System (ADS)

    Park, Jinkook; Shin, ChaeHo; Kim, Minkook; Kim, Junghwan; Park, JeongKyun; Kim, JungSoo; Jun, ChungSam; Yim, Yeny; Lee, Janghee

    2014-10-01

    As semiconductor processing becomes more complicated and pattern sizes shrink, the overlay metrology has become one of the most important issues in the semiconductor industry. Therefore, in order to obtain correct, reliable overlay values in semiconductor fabrication facilities (fab), quantization methods for the efficient management and implementation of a measurement algorithm are required, as well as an understanding of the target structures in the semiconductor device. We implemented correct, reliable overlay values in the pattern using the image processing method. The quantization method, through correlation analysis and a new algorithm for target structures, were able to improve the sensitivity to misalignment in the pattern and enable more stable and credible in-line measurement by decreasing the distribution of the residuals in overlay values. Since overlay values of the pattern in the fab were measured and managed more reliably and quickly, it is expected that our study will be able to contribute to the yield enhancement of semiconductor companies.

  3. Monte Carlo simulations of image analysis for flexible and high-resolution registration metrology

    NASA Astrophysics Data System (ADS)

    Arnz, M.; Klose, G.; Troll, G.; Beyer, D.; Mueller, A.

    2009-01-01

    The continuous progress of PROVE, the new photomask registration and overlay measurement tool currently under development at Carl Zeiss has been reported at mask related conferences since it's first publication at EMLC 2008. The project has moved in the past year from a final design on paper to functional hardware in the lab. Major tool components such as the climate control unit, the automated mask handling system and the metrology stage have been assembled and successfully tested. The scope of this paper is to report on the current status of PROVE and furthermore present results from simulations utilizing the image analysis routines of the tool. Monte-Carlo simulations were used to analyze the impact of several realistic tool limitations (camera noise, stage and focus noise and imaging telecentricity) on the image analysis process. The evaluation itself was based on a conventional threshold approach to perform both registration and CD measurement simultaneously. The results show, that the routines can deal with the tool imperfections and limit the contribution to the reproducibility error for standard registration markers to a negligible part. Even single contact holes suffer only from small errors, when camera noise is low and image averaging is increased. Employing a generally used test pattern the CD test results also confirm a sufficiently small error contribution to the CD non-uniformity reproducibility.

  4. Vehicle detection from high-resolution aerial images based on superpixel and color name features

    NASA Astrophysics Data System (ADS)

    Chen, Ziyi; Cao, Liujuan; Yu, Zang; Chen, Yiping; Wang, Cheng; Li, Jonathan

    2016-03-01

    Automatic vehicle detection from aerial images is emerging due to the strong demand of large-area traffic monitoring. In this paper, we present a novel framework for automatic vehicle detection from the aerial images. Through superpixel segmentation, we first segment the aerial images into homogeneous patches, which consist of the basic units during the detection to improve efficiency. By introducing the sparse representation into our method, powerful classification ability is achieved after the dictionary training. To effectively describe a patch, the Histogram of Oriented Gradient (HOG) is used. We further propose to integrate color information to enrich the feature representation by using the color name feature. The final feature consists of both HOG and color name based histogram, by which we get a strong descriptor of a patch. Experimental results demonstrate the effectiveness and robust performance of the proposed algorithm for vehicle detection from aerial images.

  5. Development of a spectroscopic Mueller matrix imaging ellipsometer for nanostructure metrology.

    PubMed

    Chen, Xiuguo; Du, Weichao; Yuan, Kui; Chen, Jun; Jiang, Hao; Zhang, Chuanwei; Liu, Shiyuan

    2016-05-01

    In this paper, we describe the development of a spectroscopic Mueller matrix imaging ellipsometer (MMIE), which combines the great power of Mueller matrix ellipsometry with the high spatial resolution of optical microscopy. A dual rotating-compensator configuration is adopted to collect the full 4 × 4 imaging Mueller matrix in a single measurement. The light wavelengths are scanned in the range of 400-700 nm by a monochromator. The instrument has measurement accuracy and precision better than 0.01 for all the Mueller matrix elements in both the whole image and the whole spectral range. The instrument was then applied for the measurement of nanostructures combined with an inverse diffraction problem solving technique. The experiment performed on a photoresist grating sample has demonstrated the great potential of MMIE for accurate grating reconstruction from spectral data collected by a single pixel of the camera and for efficient quantification of geometrical profile of the grating structure over a large area with pixel resolution. It is expected that MMIE will be a powerful tool for nanostructure metrology in future high-volume nanomanufacturing. PMID:27250435

  6. Study of Automatic Image Rectification and Registration of Scanned Historical Aerial Photographs

    NASA Astrophysics Data System (ADS)

    Chen, H. R.; Tseng, Y. H.

    2016-06-01

    Historical aerial photographs directly provide good evidences of past times. The Research Center for Humanities and Social Sciences (RCHSS) of Taiwan Academia Sinica has collected and scanned numerous historical maps and aerial images of Taiwan and China. Some maps or images have been geo-referenced manually, but most of historical aerial images have not been registered since there are no GPS or IMU data for orientation assisting in the past. In our research, we developed an automatic process of matching historical aerial images by SIFT (Scale Invariant Feature Transform) for handling the great quantity of images by computer vision. SIFT is one of the most popular method of image feature extracting and matching. This algorithm extracts extreme values in scale space into invariant image features, which are robust to changing in rotation scale, noise, and illumination. We also use RANSAC (Random sample consensus) to remove outliers, and obtain good conjugated points between photographs. Finally, we manually add control points for registration through least square adjustment based on collinear equation. In the future, we can use image feature points of more photographs to build control image database. Every new image will be treated as query image. If feature points of query image match the features in database, it means that the query image probably is overlapped with control images.With the updating of database, more and more query image can be matched and aligned automatically. Other research about multi-time period environmental changes can be investigated with those geo-referenced temporal spatial data.

  7. A featureless approach to 3D polyhedral building modeling from aerial images.

    PubMed

    Hammoudi, Karim; Dornaika, Fadi

    2011-01-01

    This paper presents a model-based approach for reconstructing 3D polyhedral building models from aerial images. The proposed approach exploits some geometric and photometric properties resulting from the perspective projection of planar structures. Data are provided by calibrated aerial images. The novelty of the approach lies in its featurelessness and in its use of direct optimization based on image rawbrightness. The proposed framework avoids feature extraction and matching. The 3D polyhedral model is directly estimated by optimizing an objective function that combines an image-based dissimilarity measure and a gradient score over several aerial images. The optimization process is carried out by the Differential Evolution algorithm. The proposed approach is intended to provide more accurate 3D reconstruction than feature-based approaches. Fast 3D model rectification and updating can take advantage of the proposed method. Several results and evaluations of performance from real and synthetic images show the feasibility and robustness of the proposed approach. PMID:22346575

  8. A Featureless Approach to 3D Polyhedral Building Modeling from Aerial Images

    PubMed Central

    Hammoudi, Karim; Dornaika, Fadi

    2011-01-01

    This paper presents a model-based approach for reconstructing 3D polyhedral building models from aerial images. The proposed approach exploits some geometric and photometric properties resulting from the perspective projection of planar structures. Data are provided by calibrated aerial images. The novelty of the approach lies in its featurelessness and in its use of direct optimization based on image rawbrightness. The proposed framework avoids feature extraction and matching. The 3D polyhedral model is directly estimated by optimizing an objective function that combines an image-based dissimilarity measure and a gradient score over several aerial images. The optimization process is carried out by the Differential Evolution algorithm. The proposed approach is intended to provide more accurate 3D reconstruction than feature-based approaches. Fast 3D model rectification and updating can take advantage of the proposed method. Several results and evaluations of performance from real and synthetic images show the feasibility and robustness of the proposed approach. PMID:22346575

  9. Line Matching Algorithm for Aerial Image Combining image and object space similarity constraints

    NASA Astrophysics Data System (ADS)

    Wang, Jingxue; Wang, Weixi; Li, Xiaoming; Cao, Zhenyu; Zhu, Hong; Li, Miao; He, Biao; Zhao, Zhigang

    2016-06-01

    A new straight line matching method for aerial images is proposed in this paper. Compared to previous works, similarity constraints combining radiometric information in image and geometry attributes in object plane are employed in these methods. Firstly, initial candidate lines and the elevation values of lines projection plane are determined by corresponding points in neighborhoods of reference lines. Secondly, project reference line and candidate lines back forward onto the plane, and then similarity measure constraints are enforced to reduce the number of candidates and to determine the finial corresponding lines in a hierarchical way. Thirdly, "one-to-many" and "many-to-one" matching results are transformed into "one-to-one" by merging many lines into the new one, and the errors are eliminated simultaneously. Finally, endpoints of corresponding lines are detected by line expansion process combing with "image-object-image" mapping mode. Experimental results show that the proposed algorithm can be able to obtain reliable line matching results for aerial images.

  10. Aerial imaging study of the mask-induced line-width roughness of EUV lithography masks

    NASA Astrophysics Data System (ADS)

    Wojdyla, Antoine; Donoghue, Alexander; Benk, Markus P.; Naulleau, Patrick P.; Goldberg, Kenneth A.

    2016-03-01

    EUV lithography uses reflective photomasks to print features on a wafer through the formation of an aerial image. The aerial image is influenced by the mask's substrate and pattern roughness and by photon shot noise, which collectively affect the line-width on wafer prints, with an impact on local critical dimension uniformity (LCDU). We have used SHARP, an actinic mask-imaging microscope, to study line-width roughness (LWR) in aerial images at sub-nanometer resolution. We studied the impact of photon density and the illumination partial coherence on recorded images, and found that at low coherence settings, the line-width roughness is dominated by photon noise, while at high coherence setting, the effect of speckle becomes more prominent, dominating photon noise for exposure levels of 4 photons/nm2 at threshold on the mask size.

  11. Critical Assessment of Object Segmentation in Aerial Image Using Geo-Hausdorff Distance

    NASA Astrophysics Data System (ADS)

    Sun, H.; Ding, Y.; Huang, Y.; Wang, G.

    2016-06-01

    Aerial Image records the large-range earth objects with the ever-improving spatial and radiometric resolution. It becomes a powerful tool for earth observation, land-coverage survey, geographical census, etc., and helps delineating the boundary of different kinds of objects on the earth both manually and automatically. In light of the geo-spatial correspondence between the pixel locations of aerial image and the spatial coordinates of ground objects, there is an increasing need of super-pixel segmentation and high-accuracy positioning of objects in aerial image. Besides the commercial software package of eCognition and ENVI, many algorithms have also been developed in the literature to segment objects of aerial images. But how to evaluate the segmentation results remains a challenge, especially in the context of the geo-spatial correspondence. The Geo-Hausdorff Distance (GHD) is proposed to measure the geo-spatial distance between the results of various object segmentation that can be done with the manual ground truth or with the automatic algorithms.Based on the early-breaking and random-sampling design, the GHD calculates the geographical Hausdorff distance with nearly-linear complexity. Segmentation results of several state-of-the-art algorithms, including those of the commercial packages, are evaluated with a diverse set of aerial images. They have different signal-to-noise ratio around the object boundaries and are hard to trace correctly even for human operators. The GHD value is analyzed to comprehensively measure the suitability of different object segmentation methods for aerial images of different spatial resolution. By critically assessing the strengths and limitations of the existing algorithms, the paper provides valuable insight and guideline for extensive research in automating object detection and classification of aerial image in the nation-wide geographic census. It is also promising for the optimal design of operational specification of remote

  12. Design and realization of an image mosaic system on the CCD aerial camera

    NASA Astrophysics Data System (ADS)

    Liu, Hai ying; Wang, Peng; Zhu, Hai bin; Li, Yan; Zhang, Shao jun

    2015-08-01

    It has long been difficulties in aerial photograph to stitch multi-route images into a panoramic image in real time for multi-route flight framing CCD camera with very large amount of data, and high accuracy requirements. An automatic aerial image mosaic system based on GPU development platform is described in this paper. Parallel computing of SIFT feature extraction and matching algorithm module is achieved by using CUDA technology for motion model parameter estimation on the platform, which makes it's possible to stitch multiple CCD images in real-time. Aerial tests proved that the mosaic system meets the user's requirements with 99% accuracy and 30 to 50 times' speed improvement of the normal mosaic system.

  13. Aerial image simulation for partial coherent system with programming development in MATLAB

    NASA Astrophysics Data System (ADS)

    Hasan, Md. Nazmul; Rahman, Md. Momtazur; Udoy, Ariful Banna

    2014-10-01

    Aerial image can be calculated by either Abbe's method or sum of coherent system decomposition (SOCS) method for partial coherent system. This paper introduces a programming with Matlab code that changes the analytical representation of Abbe's method to the matrix form, which has advantages for both Abbe's method and SOCS since matrix calculation is easier than double integration over object plane or pupil plane. First a singular matrix P is derived from a pupil function and effective light source in the spatial frequency domain. By applying Singular Value Decomposition (SVD) to the matrix P, eigenvalues and eigenfunctions are obtained. The aerial image can then be computed by the eigenvalues and eigenfunctions without calculation of Transmission Cross Coefficient (TCC). The aerial final image is almost identical as an original cross mask and the intensity distribution on image plane shows that it is almost uniform across the linewidth of the mask.

  14. Optical fabrication and metrology for a visible through thermal infrared multi-band imaging system

    SciTech Connect

    Magner, J.; Henson, T.

    1998-04-01

    The optical fabrication, metrology, and system wavefront testing of an off-axis three mirror anastigmatic telescope will be presented. The telescope is part of a multi-band imaging system which includes a single mechanically cooled focal plane with 15 spectral bands covering a wavelength range from 0.45 microns to 10.7 microns and an on board calibration subsystem. The imaging system is to be operated in a low earth orbit in a pushbroom scanning mode. The telescope has a 36 cm aperture, a 1.38 degree cross track by 1.82 degree along-track field of view (FOV), near diffraction limited performance in the visible, and strictly diffraction limited performance from 1.3 microns to 10.7 microns. The primary and the tertiary mirrors are general aspheres which have undergone 80% lightweighting. The secondary mirror is a hyperbola. The primary mirror was extremely difficult to fabricate and test due to its large departure from sphericity, fast f-number, and large off axis distance. The tertiary mirror has a small departure from sphericity and is only slightly off-axis, but it has a very fast f-number also. The surface wavefront measurements for the three mirrors after final figuring and lightweighting are 0.048 waves rms {at}0.6328 microns for the primary mirror and 0.025 waves rms {at}0.6328 microns for the secondary and tertiary mirrors. The telescope wavefront requirement at the center of the along-track FOV is 0.178 waves rms {at}0.6328 microns and at the edge of the along-track FOV is 0.677 waves rms {at} 0.6328 microns.

  15. High Density Aerial Image Matching: State-Of and Future Prospects

    NASA Astrophysics Data System (ADS)

    Haala, N.; Cavegn, S.

    2016-06-01

    Ongoing innovations in matching algorithms are continuously improving the quality of geometric surface representations generated automatically from aerial images. This development motivated the launch of the joint ISPRS/EuroSDR project "Benchmark on High Density Aerial Image Matching", which aims on the evaluation of photogrammetric 3D data capture in view of the current developments in dense multi-view stereo-image matching. Originally, the test aimed on image based DSM computation from conventional aerial image flights for different landuse and image block configurations. The second phase then put an additional focus on high quality, high resolution 3D geometric data capture in complex urban areas. This includes both the extension of the test scenario to oblique aerial image flights as well as the generation of filtered point clouds as additional output of the respective multi-view reconstruction. The paper uses the preliminary outcomes of the benchmark to demonstrate the state-of-the-art in airborne image matching with a special focus of high quality geometric data capture in urban scenarios.

  16. A two-camera imaging system for pest detection and aerial application

    Technology Transfer Automated Retrieval System (TEKTRAN)

    This presentation reports on the design and testing of an airborne two-camera imaging system for pest detection and aerial application assessment. The system consists of two digital cameras with 5616 x 3744 effective pixels. One camera captures normal color images with blue, green and red bands, whi...

  17. A low-cost dual-camera imaging system for aerial applicators

    Technology Transfer Automated Retrieval System (TEKTRAN)

    Agricultural aircraft provide a readily available remote sensing platform as low-cost and easy-to-use consumer-grade cameras are being increasingly used for aerial imaging. In this article, we report on a dual-camera imaging system we recently assembled that can capture RGB and near-infrared (NIR) i...

  18. Automatic geolocation of targets tracked by aerial imaging platforms using satellite imagery

    NASA Astrophysics Data System (ADS)

    Shukla, P. K.; Goel, S.; Singh, P.; Lohani, B.

    2014-11-01

    Tracking of targets from aerial platforms is an important activity in several applications, especially surveillance. Knowled ge of geolocation of these targets adds additional significant and useful information to the application. This paper determines the geolocation of a target being tracked from an aerial platform using the technique of image registration. Current approaches utilize a POS to determine the location of the aerial platform and then use the same for geolocation of the targets using the principle of photogrammetry. The constraints of cost and low-payload restrict the applicability of this approach using UAV platforms. This paper proposes a methodology for determining the geolocation of a target tracked from an aerial platform in a partially GPS devoid environment. The method utilises automatic feature based registration technique of a georeferenced satellite image with an ae rial image which is already stored in UAV's database to retrieve the geolocation of the target. Since it is easier to register subsequent aerial images due to similar viewing parameters, the subsequent overlapping images are registered together sequentially thus resulting in the registration of each of the images with georeferenced satellite image thus leading to geolocation of the target under interest. Using the proposed approach, the target can be tracked in all the frames in which it is visible. The proposed concept is verified experimentally and the results are found satisfactory. Using the proposed method, a user can obtain location of target of interest as well features on ground without requiring any POS on-board the aerial platform. The proposed approach has applications in surveillance for target tracking, target geolocation as well as in disaster management projects like search and rescue operations.

  19. A Comparison of Visual Statistics for the Image Enhancement of FORESITE Aerial Images with Those of Major Image Classes

    NASA Technical Reports Server (NTRS)

    Johnson, Daniel J.; Rahman, Zia-ur; Woodell, Glenn A.; Hines, Glenn D.

    2006-01-01

    Aerial images from the Follow-On Radar, Enhanced and Synthetic Vision Systems Integration Technology Evaluation (FORESITE) flight tests with the NASA Langley Research Center's research Boeing 757 were acquired during severe haze and haze/mixed clouds visibility conditions. These images were enhanced using the Visual Servo (VS) process that makes use of the Multiscale Retinex. The images were then quantified with visual quality metrics used internally with the VS. One of these metrics, the Visual Contrast Measure, has been computed for hundreds of FORESITE images, and for major classes of imaging--terrestrial (consumer), orbital Earth observations, orbital Mars surface imaging, NOAA aerial photographs, and underwater imaging. The metric quantifies both the degree of visual impairment of the original, un-enhanced images as well as the degree of visibility improvement achieved by the enhancement process. The large aggregate data exhibits trends relating to degree of atmospheric visibility attenuation, and its impact on limits of enhancement performance for the various image classes. Overall results support the idea that in most cases that do not involve extreme reduction in visibility, large gains in visual contrast are routinely achieved by VS processing. Additionally, for very poor visibility imaging, lesser, but still substantial, gains in visual contrast are also routinely achieved. Further, the data suggest that these visual quality metrics can be used as external standalone metrics for establishing performance parameters.

  20. Estimating growth status of winter wheat based on aerial images and hyperspectral data

    NASA Astrophysics Data System (ADS)

    Han, Yunxia; Li, Minzan; Jia, Liangliang; Zhang, Xijie; Zhang, Fusuo

    2005-08-01

    The aim of this paper is to estimate the growth status and yield of winter wheat using aerial images and hyperspectral data obtained by unmanned aircraft, and then to perform precision management to the crop. The test farm was divided into 48 cells. Twenty-four cells were selected as variable rate fertilization area, and the other 24 cells were used as contrast area with low fertilization in growth season. In 2004, the aerial images of winter wheat canopy were measured from an unmanned aircraft. The SPAD value of crop leaf was acquired using a SPAD-502 chlorophyll meter, and then the hyperspectral reflectance of the crop canopy was measured by a handheld spectroradiometer. The vegetation indices, NDVI and DVI, were calculated from the hyperspectral data. The characteristics of the aerial images were used to evaluate the growth status. The RGB values of all cells were calculated from aerial images. The result showed that total nitrogen had better correlation with SPAD, NDVI, DVI, and RGB. NDVI and DVI had high correlation with the growth condition, and R/(R+G+B) and G/(R+G+B) had good correlation with the growth status and yield. The variable rate fertilization based on aerial images and NDVI was executed in the experimental cells. The yield map showed that the spatial variation of the yield was reduced and the total yield was increased. While in contrast cells, the spatial variation of the yield is greater than in experimental cells because of the spatial variation of the field nutrition. Therefore, it is practical to use aerial images and hyperspectral data of the crop canopy in estimation of the crop growth status.

  1. An Interactive Technique for Cartographic Feature Extraction from Aerial and Satellite Image Sensors

    PubMed Central

    Kicherer, Stefan; Malpica, Jose A.; Alonso, Maria C.

    2008-01-01

    In this paper, an interactive technique for extracting cartographic features from aerial and spatial images is presented. The method is essentially an interactive method of image region segmentation based on pixel grey level and texture information. The underlying segmentation method is seeded region growing. The criterion for growing regions is based on both texture and grey level, where texture is quantified using co-occurrence matrices. The Kullback distance is utilised with co-occurrence matrices in order to describe the image texture, then the Theory of Evidence is applied to merge the information coming from texture and grey level image from the RGB bands. Several results from aerial and spatial images that support the technique are presented

  2. Vehicle Detection of Aerial Image Using TV-L1 Texture Decomposition

    NASA Astrophysics Data System (ADS)

    Wang, Y.; Wang, G.; Li, Y.; Huang, Y.

    2016-06-01

    Vehicle detection from high-resolution aerial image facilitates the study of the public traveling behavior on a large scale. In the context of road, a simple and effective algorithm is proposed to extract the texture-salient vehicle among the pavement surface. Texturally speaking, the majority of pavement surface changes a little except for the neighborhood of vehicles and edges. Within a certain distance away from the given vector of the road network, the aerial image is decomposed into a smoothly-varying cartoon part and an oscillatory details of textural part. The variational model of Total Variation regularization term and L1 fidelity term (TV-L1) is adopted to obtain the salient texture of vehicles and the cartoon surface of pavement. To eliminate the noise of texture decomposition, regions of pavement surface are refined by seed growing and morphological operation. Based on the shape saliency analysis of the central objects in those regions, vehicles are detected as the objects of rectangular shape saliency. The proposed algorithm is tested with a diverse set of aerial images that are acquired at various resolution and scenarios around China. Experimental results demonstrate that the proposed algorithm can detect vehicles at the rate of 71.5% and the false alarm rate of 21.5%, and that the speed is 39.13 seconds for a 4656 x 3496 aerial image. It is promising for large-scale transportation management and planning.

  3. Aerial-image enables diagrams and animation to be inserted in motion pictures

    NASA Technical Reports Server (NTRS)

    Andrews, S. J., Jr.; Tressel, G. W.

    1967-01-01

    Aerial-image unit makes it possible to insert diagrams and animation into live motion pictures, and also lift an element from a confusing background by suppressing general details. The unit includes a combination of two separate lens systems, the camera-projector system and the field lens system.

  4. Application of high resolution images from unmanned aerial vehicles for hydrology and range science

    Technology Transfer Automated Retrieval System (TEKTRAN)

    A common problem in many natural resource disciplines is the lack of high-enough spatial resolution images that can be used for monitoring and modeling purposes. Advances have been made in the utilization of Unmanned Aerial Vehicles (UAVs) in hydrology and rangeland science. By utilizing low fligh...

  5. Crop Status Monitoring using Multispectral and Thermal Imaging systems for Accessible Aerial Platforms

    Technology Transfer Automated Retrieval System (TEKTRAN)

    Agricultural aircraft and unmanned aerial systems (UAS) are easily scheduled and accessible remote sensing platforms. Canopy temperature data were taken with an Electrophysics PV-320T thermal imaging camera mounted in agricultural aircraft. Weather data and soil water potential were monitored and th...

  6. Semi-automatic detection of linear archaeological traces from orthorectified aerial images

    NASA Astrophysics Data System (ADS)

    Figorito, Benedetto; Tarantino, Eufemia

    2014-02-01

    This paper presents a semi-automatic approach for archaeological traces detection from aerial images. The method developed was based on the multiphase active contour model (ACM). The image was segmented into three competing regions to improve the visibility of buried remains showing in the image as crop marks (i.e. centuriations, agricultural allocations, ancient roads, etc.). An initial determination of relevant traces can be quickly carried out by the operator by sketching straight lines close to the traces. Subsequently, tuning parameters (i.e. eccentricity, orientation, minimum area and distance from input line) are used to remove non-target objects and parameterize the detected traces. The algorithm and graphical user interface for this method were developed in a MATLAB environment and tested on high resolution orthorectified aerial images. A qualitative analysis of the method was lastly performed by comparing the traces extracted with ancient traces verified by archaeologists.

  7. Aerial Vehicle Surveys of other Planetary Atmospheres and Surfaces: Imaging, Remote-sensing, and Autonomy Technology Requirements

    NASA Technical Reports Server (NTRS)

    Young, Larry A.; Pisanich, Gregory; Ippolito, Corey; Alena, Rick

    2005-01-01

    The objective of this paper is to review the anticipated imaging and remote-sensing technology requirements for aerial vehicle survey missions to other planetary bodies in our Solar system that can support in-atmosphere flight. In the not too distant future such planetary aerial vehicle (a.k.a. aerial explorers) exploration missions will become feasible. Imaging and remote-sensing observations will be a key objective for these missions. Accordingly, it is imperative that optimal solutions in terms of imaging acquisition and real-time autonomous analysis of image data sets be developed for such vehicles.

  8. Registration of multitemporal aerial optical images using line features

    NASA Astrophysics Data System (ADS)

    Zhao, Chenyang; Goshtasby, A. Ardeshir

    2016-07-01

    Registration of multitemporal images is generally considered difficult because scene changes can occur between the times the images are obtained. Since the changes are mostly radiometric in nature, features are needed that are insensitive to radiometric differences between the images. Lines are geometric features that represent straight edges of rigid man-made structures. Because such structures rarely change over time, lines represent stable geometric features that can be used to register multitemporal remote sensing images. An algorithm to establish correspondence between lines in two images of a planar scene is introduced and formulas to relate the parameters of a homography transformation to the parameters of corresponding lines in images are derived. Results of the proposed image registration on various multitemporal images are presented and discussed.

  9. Photonic Quantum Metrologies Using Photons: Phase Super-sensitivity and Entanglement-Enhanced Imaging

    NASA Astrophysics Data System (ADS)

    Takeuchi, Shigeki

    Quantum information science has been attracting significant attention recently. It harnesses the intrinsic nature of quantum mechanics such as quantum superposition, the uncertainty principle, and quantum entanglement to realize novel functions. Recently, quantum metrology has been emerging as an application of quantum information science. Among the many physical quanta, photons are an indispensable tool for metrology, as light-based measurements are applicable to fields ranging from astronomy to life science. In quantum metrology, quantum entanglement between photons is the phenomenon utilized.In this chapter, we will try to give a brief overview of this emerging field mainly focusing on two topics: Optical phase measurements beyond the standard quantum limit (SQL) and quantum optical coherence tomography (QOCT). The sensitivity of an optical phase measurement for a given photon number N is usually limited by N sqrt{N} , which is called the SQL or shot noise limit. However, the SQL can be overcome when non-classical light is used. We explain the basic concepts and the recent experimental results that exceed the SQL, and an application of this technology for microscopy. QOCT harnesses the quantum entanglement of photons in frequency to cancel out the dispersion effect, which degrades the resolution of conventional OCT. The mechanism of the dispersion cancellation and the latest experimental results will be given.

  10. RIM-13: A high-resolution imaging tool for aerial image monitoring of patterned and blank EUV reticles

    NASA Astrophysics Data System (ADS)

    Booth, M.; Brunton, A.; Cashmore, J.; Elbourn, P.; Elliner, G.; Gower, M.; Greuters, J.; Hirsch, J.; Kling, L.; McEntee, N.; Richards, P.; Truffert, V.; Wallhead, I.; Whitfield, M.

    2006-03-01

    Key features of the RIM-13 EUV actinic reticle imaging microscope are summarised. This is a tool which generates aerial images from blank or patterned EUV masks, emulating the illumination and projection optics of an exposure tool. Such images of mask defects, acquired by a CCD camera, are analysed using the tool software to predict their effect on resist exposure. Optical, mechanical and software performance of the tool are reported.

  11. Evaluation of Color Settings in Aerial Images with the Use of Eye-Tracking User Study

    NASA Astrophysics Data System (ADS)

    Mirijovsky, J.; Popelka, S.

    2016-06-01

    The main aim of presented paper is to find the most realistic and preferred color settings for four different types of surfaces on the aerial images. This will be achieved through user study with the use of eye-movement recording. Aerial images taken by the unmanned aerial system were used as stimuli. From each image, squared crop area containing one of the studied types of surfaces (asphalt, concrete, water, soil, and grass) was selected. For each type of surface, the real value of reflectance was found with the use of precise spectroradiometer ASD HandHeld 2 which measures the reflectance. The device was used at the same time as aerial images were captured, so lighting conditions and state of vegetation were equal. The spectral resolution of the ASD device is better than 3.0 nm. For defining the RGB values of selected type of surface, the spectral reflectance values recorded by the device were merged into wider groups. Finally, we get three groups corresponding to RGB color system. Captured images were edited with the graphic editor Photoshop CS6. Contrast, clarity, and brightness were edited for all surface types on images. Finally, we get a set of 12 images of the same area with different color settings. These images were put into the grid and used as stimuli for the eye-tracking experiment. Eye-tracking is one of the methods of usability studies and it is considered as relatively objective. Eye-tracker SMI RED 250 with the sampling frequency 250 Hz was used in the study. As respondents, a group of 24 students of Geoinformatics and Geography was used. Their task was to select which image in the grid has the best color settings. The next task was to select which color settings they prefer. Respondents' answers were evaluated and the most realistic and most preferable color settings were found. The advantage of the eye-tracking evaluation was that also the process of the selection of the answers was analyzed. Areas of Interest were marked around each image in the

  12. First results for an image processing workflow for hyperspatial imagery acquired with a low-cost unmanned aerial vehicle (UAV).

    Technology Transfer Automated Retrieval System (TEKTRAN)

    Very high-resolution images from unmanned aerial vehicles (UAVs) have great potential for use in rangeland monitoring and assessment, because the imagery fills the gap between ground-based observations and remotely sensed imagery from aerial or satellite sensors. However, because UAV imagery is ofte...

  13. Observation of coral reefs on Ishigaki Island, Japan, using Landsat TM images and aerial photographs

    SciTech Connect

    Matsunaga, Tsuneo; Kayanne, Hajime

    1997-06-01

    Ishigaki Island is located at the southwestern end of Japanese Islands and famous for its fringing coral reefs. More than twenty LANDSAT TM images in twelve years and aerial photographs taken on 1977 and 1994 were used to survey two shallow reefs on this island, Shiraho and Kabira. Intensive field surveys were also conducted in 1995. All satellite images of Shiraho were geometrically corrected and overlaid to construct a multi-date satellite data set. The effects of solar elevation and tide on satellite imagery were studied with this data set. The comparison of aerial and satellite images indicated that significant changes occurred between 1977 and 1984 in Kabira: rapid formation in the western part and decrease in the eastern part of dark patches. The field surveys revealed that newly formed dark patches in the west contain young corals. These results suggest that remote sensing is useful for not only mapping but also monitoring of shallow coral reefs.

  14. Application of machine learning for the evaluation of turfgrass plots using aerial images

    NASA Astrophysics Data System (ADS)

    Ding, Ke; Raheja, Amar; Bhandari, Subodh; Green, Robert L.

    2016-05-01

    Historically, investigation of turfgrass characteristics have been limited to visual ratings. Although relevant information may result from such evaluations, final inferences may be questionable because of the subjective nature in which the data is collected. Recent advances in computer vision techniques allow researchers to objectively measure turfgrass characteristics such as percent ground cover, turf color, and turf quality from the digital images. This paper focuses on developing a methodology for automated assessment of turfgrass quality from aerial images. Images of several turfgrass plots of varying quality were gathered using a camera mounted on an unmanned aerial vehicle. The quality of these plots were also evaluated based on visual ratings. The goal was to use the aerial images to generate quality evaluations on a regular basis for the optimization of water treatment. Aerial images are used to train a neural network so that appropriate features such as intensity, color, and texture of the turfgrass are extracted from these images. Neural network is a nonlinear classifier commonly used in machine learning. The output of the neural network trained model is the ratings of the grass, which is compared to the visual ratings. Currently, the quality and the color of turfgrass, measured as the greenness of the grass, are evaluated. The textures are calculated using the Gabor filter and co-occurrence matrix. Other classifiers such as support vector machines and simpler linear regression models such as Ridge regression and LARS regression are also used. The performance of each model is compared. The results show encouraging potential for using machine learning techniques for the evaluation of turfgrass quality and color.

  15. Shoreline extraction from light detection and ranging digital elevation model data and aerial images

    NASA Astrophysics Data System (ADS)

    Yousef, Amr; Iftekharuddin, Khan M.; Karim, Mohammad A.

    2014-01-01

    There is an increased demand for understanding the accurate position of the shorelines. The automatic extraction of shorelines utilizing the digital elevation models (DEMs) obtained from light detection and ranging (LiDAR), aerial images, and multispectral images has become very promising. In this article, we develop two innovative algorithms that can effectively extract shorelines depending on the available data sources. The first is a multistep morphological technique that works on LiDAR DEM with respect to a tidal datum, whereas the second depends on the availability of training data to extract shorelines from LiDAR DEM fused with aerial images. Unlike similar techniques, the morphological approach detects and eliminates the outliers that result from waves, etc., by means of an anomaly test with neighborhood constraints. Additionally, it eliminates docks, bridges, and fishing piers along the extracted shorelines by means of Hough transform. The second approach extracts the shoreline by means of color space conversion of the aerial images and the support vector machines classifier to segment the fused data into water and land. We perform Monte-Carlo simulations to estimate the confidence interval for the error in shoreline position. Compared with other relevant techniques in literature, the proposed methods offer better accuracy in shoreline extraction.

  16. Detection and clustering of features in aerial images by neuron network-based algorithm

    NASA Astrophysics Data System (ADS)

    Vozenilek, Vit

    2015-12-01

    The paper presents the algorithm for detection and clustering of feature in aerial photographs based on artificial neural networks. The presented approach is not focused on the detection of specific topographic features, but on the combination of general features analysis and their use for clustering and backward projection of clusters to aerial image. The basis of the algorithm is a calculation of the total error of the network and a change of weights of the network to minimize the error. A classic bipolar sigmoid was used for the activation function of the neurons and the basic method of backpropagation was used for learning. To verify that a set of features is able to represent the image content from the user's perspective, the web application was compiled (ASP.NET on the Microsoft .NET platform). The main achievements include the knowledge that man-made objects in aerial images can be successfully identified by detection of shapes and anomalies. It was also found that the appropriate combination of comprehensive features that describe the colors and selected shapes of individual areas can be useful for image analysis.

  17. Mobile Aerial Tracking and Imaging System (MATRIS) for Aeronautical Research

    NASA Technical Reports Server (NTRS)

    Banks, Daniel W.; Blanchard, R. C.; Miller, G. M.

    2004-01-01

    A mobile, rapidly deployable ground-based system to track and image targets of aeronautical interest has been developed. Targets include reentering reusable launch vehicles (RLVs) as well as atmospheric and transatmospheric vehicles. The optics were designed to image targets in the visible and infrared wavelengths. To minimize acquisition cost and development time, the system uses commercially available hardware and software where possible. The conception and initial funding of this system originated with a study of ground-based imaging of global aerothermal characteristics of RLV configurations. During that study NASA teamed with the Missile Defense Agency/Innovative Science and Technology Experimentation Facility (MDA/ISTEF) to test techniques and analysis on two Space Shuttle flights.

  18. EROS main image file - A picture perfect database for Landsat imagery and aerial photography

    NASA Technical Reports Server (NTRS)

    Jack, R. F.

    1984-01-01

    The Earth Resources Observation System (EROS) Program was established by the U.S. Department of the Interior in 1966 under the administration of the Geological Survey. It is primarily concerned with the application of remote sensing techniques for the management of natural resources. The retrieval system employed to search the EROS database is called INORAC (Inquiry, Ordering, and Accounting). A description is given of the types of images identified in EROS, taking into account Landsat imagery, Skylab images, Gemini/Apollo photography, and NASA aerial photography. Attention is given to retrieval commands, geographic coordinate searching, refinement techniques, various online functions, and questions regarding the access to the EROS Main Image File.

  19. Orientation and Dense Reconstruction of Unordered Terrestrial and Aerial Wide Baseline Image Sets

    NASA Astrophysics Data System (ADS)

    Bartelsen, J.; Mayer, H.; Hirschmüller, H.; Kuhn, A.; Michelini, M.

    2012-07-01

    In this paper we present an approach for detailed and precise automatic dense 3D reconstruction using images from consumer cameras. The major difference between our approach and many others is that we focus on wide-baseline image sets. We have combined and improved several methods, particularly, least squares matching, RANSAC, scale-space maxima and bundle adjustment, for robust matching and parameter estimation. Point correspondences and the five-point algorithm lead to relative orientation. Due to our robust matching method it is possible to orient images under much more unfavorable conditions, for instance concerning illumination changes or scale differences, than for often used operators such as SIFT. For dense reconstruction, we use our orientation as input for Semiglobal Matching (SGM) resulting into dense depth images. The latter can be fused into a 2.5D model for eliminating the redundancy of the highly overlapping depth images. However, some applications require full 3D models. A solution to this problem is part of our current work, for which preliminary results are presented in this paper. With very small unmanned aerial systems (Micro UAS) it is possible to acquire images which have a perspective similar to terrestrial images and can thus be combined with them. Such a combination is useful for an almost complete 3D reconstruction of urban scenes. We have applied our approach to several hundred aerial and terrestrial images and have generated detailed 2.5D and 3D models of urban areas.

  20. Performance Validation of High Resolution Digital Surface Models Generated by Dense Image Matching with the Aerial Images

    NASA Astrophysics Data System (ADS)

    Yastikli, N.; Bayraktar, H.; Erisir, Z.

    2014-11-01

    The digital surface models (DSM) are the most popular products to determine visible surface of Earth which includes all non-terrain objects such as vegetation, forest, and man-made constructions. The airborne light detection and ranging (LiDAR) is the preferred technique for high resolution DSM generation in local coverage. The automatic generation of the high resolution DSM is also possible with stereo image matching using the aerial images. The image matching algorithms usually rely on the feature based matching for DSM generation. First, feature points are extracted and then corresponding features are searched in the overlapping images. These image matching algorithms face with the problems in the areas which have repetitive pattern such as urban structure and forest. The recent innovation in camera technology and image matching algorithm enabled the automatic dense DSM generation for large scale city and environment modelling. The new pixel-wise matching approaches are generates very high resolution DSMs which corresponds to the ground sample distance (GSD) of the original images. The numbers of the research institutes and photogrammetric software vendors are currently developed software tools for dense DSM generation using the aerial images. This new approach can be used high resolution DSM generation for the larger cities, rural areas and forest even Nation-wide applications. In this study, the performance validation of high resolution DSM generated by pixel-wise dense image matching in part of Istanbul was aimed. The study area in Istanbul is including different land classes such as open areas, forest and built-up areas to test performance of dense image matching in different land classes. The obtained result from this performance validation in Istanbul test area showed that, high resolution DSM which corresponds to the ground sample distance (GSD) of original aerial image can be generated successfully by pixel-wise dense image matching using commercial and

  1. Semi-auto assessment system on building damage caused by landslide disaster with high-resolution satellite and aerial images

    NASA Astrophysics Data System (ADS)

    Sun, Bo; Xu, Qihua; He, Jun; Ge, Fengxiang; Wang, Ying

    2015-10-01

    In recent years, earthquake and heavy rain have triggered more and more landslides, which have caused serious economic losses. The timely detection of the disaster area and the assessment of the hazard are necessary and primary for disaster mitigation and relief. As high-resolution satellite and aerial images have been widely used in the field of environmental monitoring and disaster management, the damage assessment by processing satellite and aerial images has become a hot spot of research work. The rapid assessment of building damage caused by landslides with high-resolution satellite or aerial images is the focus of this article. In this paper, after analyzing the morphological characteristics of the landslide disaster, we proposed a set of criteria for rating building damage, and designed a semi-automatic evaluation system. The system is applied to the satellite and aerial images processing. The performance of the experiments demonstrated the effectiveness of our system.

  2. Moving object detection using dynamic motion modelling from UAV aerial images.

    PubMed

    Saif, A F M Saifuddin; Prabuwono, Anton Satria; Mahayuddin, Zainal Rasyid

    2014-01-01

    Motion analysis based moving object detection from UAV aerial image is still an unsolved issue due to inconsideration of proper motion estimation. Existing moving object detection approaches from UAV aerial images did not deal with motion based pixel intensity measurement to detect moving object robustly. Besides current research on moving object detection from UAV aerial images mostly depends on either frame difference or segmentation approach separately. There are two main purposes for this research: firstly to develop a new motion model called DMM (dynamic motion model) and secondly to apply the proposed segmentation approach SUED (segmentation using edge based dilation) using frame difference embedded together with DMM model. The proposed DMM model provides effective search windows based on the highest pixel intensity to segment only specific area for moving object rather than searching the whole area of the frame using SUED. At each stage of the proposed scheme, experimental fusion of the DMM and SUED produces extracted moving objects faithfully. Experimental result reveals that the proposed DMM and SUED have successfully demonstrated the validity of the proposed methodology. PMID:24892103

  3. A Semi-Automated Single Day Image Differencing Technique to Identify Animals in Aerial Imagery

    PubMed Central

    Terletzky, Pat; Ramsey, Robert Douglas

    2014-01-01

    Our research presents a proof-of-concept that explores a new and innovative method to identify large animals in aerial imagery with single day image differencing. We acquired two aerial images of eight fenced pastures and conducted a principal component analysis of each image. We then subtracted the first principal component of the two pasture images followed by heuristic thresholding to generate polygons. The number of polygons represented the number of potential cattle (Bos taurus) and horses (Equus caballus) in the pasture. The process was considered semi-automated because we were not able to automate the identification of spatial or spectral thresholding values. Imagery was acquired concurrently with ground counts of animal numbers. Across the eight pastures, 82% of the animals were correctly identified, mean percent commission was 53%, and mean percent omission was 18%. The high commission error was due to small mis-alignments generated from image-to-image registration, misidentified shadows, and grouping behavior of animals. The high probability of correctly identifying animals suggests short time interval image differencing could provide a new technique to enumerate wild ungulates occupying grassland ecosystems, especially in isolated or difficult to access areas. To our knowledge, this was the first attempt to use standard change detection techniques to identify and enumerate large ungulates. PMID:24454827

  4. Parameter-Based Performance Analysis of Object-Based Image Analysis Using Aerial and Quikbird-2 Images

    NASA Astrophysics Data System (ADS)

    Kavzoglu, T.; Yildiz, M.

    2014-09-01

    Opening new possibilities for research, very high resolution (VHR) imagery acquired by recent commercial satellites and aerial systems requires advanced approaches and techniques that can handle large volume of data with high local variance. Delineation of land use/cover information from VHR images is a hot research topic in remote sensing. In recent years, object-based image analysis (OBIA) has become a popular solution for image analysis tasks as it considers shape, texture and content information associated with the image objects. The most important stage of OBIA is the image segmentation process applied prior to classification. Determination of optimal segmentation parameters is of crucial importance for the performance of the selected classifier. In this study, effectiveness and applicability of the segmentation method in relation to its parameters was analysed using two VHR images, an aerial photo and a Quickbird-2 image. Multi-resolution segmentation technique was employed with its optimal parameters of scale, shape and compactness that were defined after an extensive trail process on the data sets. Nearest neighbour classifier was applied on the segmented images, and then the accuracy assessment was applied. Results show that segmentation parameters have a direct effect on the classification accuracy, and low values of scale-shape combinations produce the highest classification accuracies. Also, compactness parameter was found to be having minimal effect on the construction of image objects, hence it can be set to a constant value in image classification.

  5. Contact area as the intuitive definition of contact CD based on aerial image analysis

    NASA Astrophysics Data System (ADS)

    Polonsky, Netanel; Sagiv, Amir; Mangan, Shmoolik

    2009-03-01

    As feature sizes continue to diminish, optical lithography is driven into the extreme low-k1 regime, where the high MEEF increasingly complicates the relationship between the mask pattern and the aerial image. This is true in particular for twodimensional mask patterns, which are by nature much more complicated than patterns possessing one-dimensional symmetry. Thus, the intricacy of 2D image formation typically requires a much broader arsenal of resolution enhancement techniques over complex phase shift masks, including SRAFs and OPC, as well as exotic off-axis illumination geometries. This complexity on the mask side makes the printability effect of a random defect on a 2D pattern a field of rich and delicate phenomenology. This complexity is reflected in the dispute over the CD definition of 2D patterns: some sources use the X and Y values, while others use the contact area. Here, we argue that for compact features, for which the largest dimension is not wider than the PSF of the stepper optics, the area definition is the natural one. We study the response of the aerial image to small perturbations in mask pattern. We show that any perturbation creates an effect extending in all directions, thus affecting the area and not the size in a single direction. We also show that, irrespective of the source of perturbation, the aerial signal is proportional to the variation in the area of the printed feature. The consequence of this effect is that aerial inspection signal scales linearly with the variation of printed area of the tested feature.

  6. U.S. DOE, Kazakhstan government launch aerial imaging project

    SciTech Connect

    Hamm, J.

    1997-10-01

    The US Department of Energy (DOE) and the Kazakhstan government have launched a breakthrough science and technology mission to use DOE technology developed to detect weapons proliferation to search for oil and mineral reserves in Kazakhstan. The Pacific Northwest National Laboratory is leading the research effort, which began in June. This mission to conduct airborne imaging flights over Kazakhstan is the result of a recently signed agreement between Pacific Northwest and Earth Search Sciences Inc., a remote sensing firm based in Idaho, to look for oil and mineral deposits in the Republic of Kazakhstan in central Asia. It is the first time this technology will be used outside the United States.

  7. Wavefront metrology for high resolution optical systems

    NASA Astrophysics Data System (ADS)

    Miyakawa, Ryan H.

    Next generation extreme ultraviolet (EUV) optical systems are moving to higher resolution optics to accommodate smaller length scales targeted by the semiconductor industry. As the numerical apertures (NA) of the optics become larger, it becomes increasingly difficult to characterize aberrations due to experimental challenges associated with high-resolution spatial filters and geometrical effects caused by large incident angles of the test wavefront. This dissertation focuses on two methods of wavefront metrology for high resolution optical systems. The first method, lateral shearing interferometry (LSI), is a self-referencing interferometry where the test wavefront is incident on a low spatial frequency grating, and the resulting interference between the diffracted orders is used to reconstruct the wavefront aberrations. LSI has many advantages over other interferometric tests such as phase-shifting point diffraction interferometry (PS/PDI) due to its experimental simplicity, stability, relaxed coherence requirements, and its ability to scale to high numerical apertures. While LSI has historically been a qualitative test, this dissertation presents a novel quantitative investigation of the LSI interferogram. The analysis reveals the existence of systematic aberrations due to the nonlinear angular response from the diffraction grating that compromises the accuracy of LSI at medium to high NAs. In the medium NA regime (0.15 < NA < 0.35), a holographic model is presented that derives the systematic aberrations in closed form, which demonstrates an astigmatism term that scales as the square of the grating defocus. In the high NA regime (0.35 < NA), a geometrical model is introduced that describes the aberrations as a system of transcendental equations that can be solved numerically. The characterization and removal of these systematic errors is a necessary step that unlocks LSI as a viable candidate for high NA EUV optical testing. The second method is a novel image

  8. Seasonal landslide mapping and estimation of landslide mobilization rates using aerial and satellite images

    NASA Astrophysics Data System (ADS)

    Fiorucci, F.; Cardinali, M.; Carlà, R.; Rossi, M.; Mondini, A. C.; Santurri, L.; Ardizzone, F.; Guzzetti, F.

    2011-06-01

    We tested the possibility of using digital, color aerial ortho-photographs and monoscopic, panchromatic satellite images of comparable spatial and radiometric resolution, to map recent landslides in Italy and to update existing measures of landslide mobilization. In a 90-km 2 area in Umbria, central Apennines, rainfall resulted in abundant landslides in the period from September 2004 to June 2005. Analysis of the rainfall record determined the approximate dates of landslide occurrence and revealed that the slope failures occurred in response to moderately wet rainfall periods. The slope failures occurred primarily in cultivated terrain and left subtle morphological and land cover signatures, making the recognition and mapping of the individual landslides problematic. Despite the difficulty with the identification of the landslides without the use of stereoscopic visualization, visual analysis of the aerial and satellite images allowed mapping 457 new landslides, ranging in area 3.0 × 10 1 < AL < 2.5 × 10 4 m 2, for a total landslide area ALT = 6.92 × 10 5 m 2. To identify the landslides, the investigators adopted the interpretation criteria commonly used to identify and map landslides on aerial photography. The result confirms that monoscopic, very high resolution images taken by airborne and satellite sensors can be used to prepare landslide maps even where slope failures are difficult to detect, provided the imagery has sufficient geometric and radiometric resolutions. The different dates of the aerial (March 2005) and the satellite (June-July 2005) images allowed the temporal segmentation of the landslide information, and studying the statistics of landslide area and volume for different periods. Compared to pre-existing information on the abundance and size of the landslides in the area, the inventory obtained by studying the aerial and satellite images proved more complete. The new mapping showed 145% more landslides and 85% more landslide area than a pre

  9. Two matrix approaches for aerial image formation obtained by extending and modifying the transmission cross coefficients.

    PubMed

    Yamazoe, Kenji

    2010-06-01

    This paper physically compares two different matrix representations of partially coherent imaging with the introduction of matrices E and Z, containing the source, object, and pupil. The matrix E is obtained by extending the Hopkins transmission cross coefficient (TCC) approach such that the pupil function is shifted while the matrix Z is obtained by shifting the object spectrum. The aerial image I can be written as a convex quadratic form I = = , where |phi> is a column vector representing plane waves. It is shown that rank(Z) < or = rank(E) = rank(T) = N, where T is the TCC matrix and N is the number of the point sources for a given unpolarized illumination. Therefore, the matrix Z requires fewer than N eigenfunctions for a complete aerial image formation, while the matrix E or T always requires N eigenfunctions. More importantly, rank(Z) varies depending on the degree of coherence determined by the von Neumann entropy, which is shown to relate to the mutual intensity. For an ideal pinhole as an object, emitting spatially coherent light, only one eigenfunction--i.e., the pupil function--is enough to describe the coherent imaging. In this case, we obtain rank(Z) = 1 and the pupil function as the only eigenfunction regardless of the illumination. However, rank(E) = rank(T) = N even when the object is an ideal pinhole. In this sense, aerial image formation with the matrix Z is physically more meaningful than with the matrix E. The matrix Z is decomposed as B(dagger)B, where B is a singular matrix, suggesting that the matrix B as well as Z is a principal operator characterizing the degree of coherence of the partially coherent imaging. PMID:20508699

  10. Land Use Classification from Vhr Aerial Images Using Invariant Colour Components and Texture

    NASA Astrophysics Data System (ADS)

    Movia, A.; Beinat, A.; Sandri, T.

    2016-06-01

    Very high resolution (VHR) aerial images can provide detailed analysis about landscape and environment; nowadays, thanks to the rapid growing airborne data acquisition technology an increasing number of high resolution datasets are freely available. In a VHR image the essential information is contained in the red-green-blue colour components (RGB) and in the texture, therefore a preliminary step in image analysis concerns the classification in order to detect pixels having similar characteristics and to group them in distinct classes. Common land use classification approaches use colour at a first stage, followed by texture analysis, particularly for the evaluation of landscape patterns. Unfortunately RGB-based classifications are significantly influenced by image setting, as contrast, saturation, and brightness, and by the presence of shadows in the scene. The classification methods analysed in this work aim to mitigate these effects. The procedures developed considered the use of invariant colour components, image resampling, and the evaluation of a RGB texture parameter for various increasing sizes of a structuring element. To identify the most efficient solution, the classification vectors obtained were then processed by a K-means unsupervised classifier using different metrics, and the results were compared with respect to corresponding user supervised classifications. The experiments performed and discussed in the paper let us evaluate the effective contribution of texture information, and compare the most suitable vector components and metrics for automatic classification of very high resolution RGB aerial images.

  11. Real-time aerial multispectral imaging solutions using dichroic filter arrays

    NASA Astrophysics Data System (ADS)

    Chandler, Eric V.; Fish, David E.

    2014-06-01

    The next generation of multispectral sensors and cameras needs to deliver significant improvements in size, weight, portability, and spectral band customization to support widespread commercial deployment for a variety of purposebuilt aerial, unmanned, and scientific applications. The benefits of multispectral imaging are well established for applications including machine vision, biomedical, authentication, and remote sensing environments - but many aerial and OEM solutions require more compact, robust, and cost-effective production cameras to realize these benefits. A novel implementation uses micropatterning of dichroic filters into Bayer and custom mosaics, enabling true real-time multispectral imaging with simultaneous multi-band image acquisition. Consistent with color camera image processing, individual spectral channels are de-mosaiced with each channel providing an image of the field of view. We demonstrate recent results of 4-9 band dichroic filter arrays in multispectral cameras using a variety of sensors including linear, area, silicon, and InGaAs. Specific implementations range from hybrid RGB + NIR sensors to custom sensors with applicationspecific VIS, NIR, and SWIR spectral bands. Benefits and tradeoffs of multispectral sensors using dichroic filter arrays are compared with alternative approaches - including their passivity, spectral range, customization options, and development path. Finally, we report on the wafer-level fabrication of dichroic filter arrays on imaging sensors for scalable production of multispectral sensors and cameras.

  12. Film cameras or digital sensors? The challenge ahead for aerial imaging

    USGS Publications Warehouse

    Light, D.L.

    1996-01-01

    Cartographic aerial cameras continue to play the key role in producing quality products for the aerial photography business, and specifically for the National Aerial Photography Program (NAPP). One NAPP photograph taken with cameras capable of 39 lp/mm system resolution can contain the equivalent of 432 million pixels at 11 ??m spot size, and the cost is less than $75 per photograph to scan and output the pixels on a magnetic storage medium. On the digital side, solid state charge coupled device linear and area arrays can yield quality resolution (7 to 12 ??m detector size) and a broader dynamic range. If linear arrays are to compete with film cameras, they will require precise attitude and positioning of the aircraft so that the lines of pixels can be unscrambled and put into a suitable homogeneous scene that is acceptable to an interpreter. Area arrays need to be much larger than currently available to image scenes competitive in size with film cameras. Analysis of the relative advantages and disadvantages of the two systems show that the analog approach is more economical at present. However, as arrays become larger, attitude sensors become more refined, global positioning system coordinate readouts become commonplace, and storage capacity becomes more affordable, the digital camera may emerge as the imaging system for the future. Several technical challenges must be overcome if digital sensors are to advance to where they can support mapping, charting, and geographic information system applications.

  13. Using aberration test patterns to optimize the performance of EUV aerial imaging microscopes

    SciTech Connect

    Mochi, Iacopo; Goldberg, Kenneth A.; Miyakawa, Ryan; Naulleau, Patrick; Han, Hak-Seung; Huh, Sungmin

    2009-06-16

    The SEMATECH Berkeley Actinic Inspection Tool (AIT) is a prototype EUV-wavelength zoneplate microscope that provides high quality aerial image measurements of EUV reticles. To simplify and improve the alignment procedure we have created and tested arrays of aberration-sensitive patterns on EUV reticles and we have compared their images collected with the AIT to the expected shapes obtained by simulating the theoretical wavefront of the system. We obtained a consistent measure of coma and astigmatism in the center of the field of view using two different patterns, revealing a misalignment condition in the optics.

  14. Looking into the water with oblique head tilting: revision of the aerial binocular imaging of underwater objects.

    PubMed

    Horváth, Gábor; Buchta, Krisztián; Varjú, Dezsö

    2003-06-01

    It is a well-known phenomenon that when we look into the water with two aerial eyes, both the apparent position and the apparent shape of underwater objects are different from the real ones because of refraction at the water surface. Earlier studies of the refraction-distorted structure of the underwater binocular visual field of aerial observers were restricted to either vertically or horizontally oriented eyes. We investigate a generalized version of this problem: We calculate the position of the binocular image point of an underwater object point viewed by two arbitrarily positioned aerial eyes, including oblique orientations of the eyes relative to the flat water surface. Assuming that binocular image fusion is performed by appropriate vergent eye movements to bring the object's image onto the foveas, the structure of the underwater binocular visual field is computed and visualized in different ways as a function of the relative positions of the eyes. We show that a revision of certain earlier treatments of the aerial imaging of underwater objects is necessary. We analyze and correct some widespread erroneous or incomplete representations of this classical geometric optical problem that occur in different textbooks. Improving the theory of aerial binocular imaging of underwater objects, we demonstrate that the structure of the underwater binocular visual field of aerial observers distorted by refraction is more complex than has been thought previously. PMID:12801180

  15. Image degradation in aerial imagery duplicates. [photographic processing of photographic film and reproduction (copying)

    NASA Technical Reports Server (NTRS)

    Lockwood, H. E.

    1975-01-01

    A series of Earth Resources Aircraft Program data flights were made over an aerial test range in Arizona for the evaluation of large cameras. Specifically, both medium altitude and high altitude flights were made to test and evaluate a series of color as well as black-and-white films. Image degradation, inherent in duplication processing, was studied. Resolution losses resulting from resolution characteristics of the film types are given. Color duplicates, in general, are shown to be degraded more than black-and-white films because of the limitations imposed by available aerial color duplicating stock. Results indicate that a greater resolution loss may be expected when the original has higher resolution. Photographs of the duplications are shown.

  16. FOREWORD: Neutron metrology Neutron metrology

    NASA Astrophysics Data System (ADS)

    Thomas, David J.; Nolte, Ralf; Gressier, Vincent

    2011-12-01

    The International Committee for Weights and Measures (CIPM) has consultative committees covering various areas of metrology. The Consultative Committee for Ionizing Radiation (CCRI) differs from the others in having three sections: Section (I) deals with radiation dosimetry, Section (II) with radionuclide metrology and Section (III) with neutron metrology. In 2003 a proposal was made to publish special issues of Metrologia covering the work of the three Sections. Section (II) was the first to complete their task, and their special issue was published in 2007, volume 44(4). This was followed in 2009 by the special issue on radiation dosimetry, volume 46(2). The present issue, volume 48(6), completes the trilogy and attempts to explain neutron metrology, the youngest of the three disciplines, the neutron only having been discovered in 1932, to a wider audience and to highlight the relevance and importance of this field. When originally approached with the idea of this special issue, Section (III) immediately saw the value of a publication specifically on neutron metrology. It is a topic area where papers tend to be scattered throughout the literature in journals covering, for example, nuclear instrumentation, radiation protection or radiation measurements in general. Review articles tend to be few. People new to the field often ask for an introduction to the various topics. There are some excellent older textbooks, but these are now becoming obsolete. More experienced workers in specific areas of neutron metrology can find it difficult to know the latest position in related areas. The papers in this issue attempt, without presenting a purely historical outline, to describe the field in a sufficiently logical way to provide the novice with a clear introduction, while being sufficiently up-to-date to provide the more experienced reader with the latest scientific developments in the different topic areas. Neutron radiation fields obviously occur throughout the nuclear

  17. FOREWORD: Neutron metrology Neutron metrology

    NASA Astrophysics Data System (ADS)

    Thomas, David J.; Nolte, Ralf; Gressier, Vincent

    2011-12-01

    The International Committee for Weights and Measures (CIPM) has consultative committees covering various areas of metrology. The Consultative Committee for Ionizing Radiation (CCRI) differs from the others in having three sections: Section (I) deals with radiation dosimetry, Section (II) with radionuclide metrology and Section (III) with neutron metrology. In 2003 a proposal was made to publish special issues of Metrologia covering the work of the three Sections. Section (II) was the first to complete their task, and their special issue was published in 2007, volume 44(4). This was followed in 2009 by the special issue on radiation dosimetry, volume 46(2). The present issue, volume 48(6), completes the trilogy and attempts to explain neutron metrology, the youngest of the three disciplines, the neutron only having been discovered in 1932, to a wider audience and to highlight the relevance and importance of this field. When originally approached with the idea of this special issue, Section (III) immediately saw the value of a publication specifically on neutron metrology. It is a topic area where papers tend to be scattered throughout the literature in journals covering, for example, nuclear instrumentation, radiation protection or radiation measurements in general. Review articles tend to be few. People new to the field often ask for an introduction to the various topics. There are some excellent older textbooks, but these are now becoming obsolete. More experienced workers in specific areas of neutron metrology can find it difficult to know the latest position in related areas. The papers in this issue attempt, without presenting a purely historical outline, to describe the field in a sufficiently logical way to provide the novice with a clear introduction, while being sufficiently up-to-date to provide the more experienced reader with the latest scientific developments in the different topic areas. Neutron radiation fields obviously occur throughout the nuclear

  18. Underwater binocular imaging of aerial objects versus the position of eyes relative to the flat water surface.

    PubMed

    Barta, András; Horváth, Gábor

    2003-12-01

    The apparent position, size, and shape of aerial objects viewed binocularly from water change as a result of the refraction of light at the water surface. Earlier studies of the refraction-distorted structure of the aerial binocular visual field of underwater observers were restricted to either vertically or horizontally oriented eyes. Here we calculate the position of the binocular image point of an aerial object point viewed by two arbitrarily positioned underwater eyes when the water surface is flat. Assuming that binocular image fusion is performed by appropriate vergent eye movements to bring the object's image onto the foveae, the structure of the aerial binocular visual field is computed and visualized as a function of the relative positions of the eyes. We also analyze two erroneous representations of the underwater imaging of aerial objects that have occurred in the literature. It is demonstrated that the structure of the aerial binocular visual field of underwater observers distorted by refraction is more complex than has been thought previously. PMID:14686517

  19. Metrological digital audio reconstruction

    DOEpatents

    Fadeyev; Vitaliy , Haber; Carl

    2004-02-19

    Audio information stored in the undulations of grooves in a medium such as a phonograph record may be reconstructed, with little or no contact, by measuring the groove shape using precision metrology methods coupled with digital image processing and numerical analysis. The effects of damage, wear, and contamination may be compensated, in many cases, through image processing and analysis methods. The speed and data handling capacity of available computing hardware make this approach practical. Two examples used a general purpose optical metrology system to study a 50 year old 78 r.p.m. phonograph record and a commercial confocal scanning probe to study a 1920's celluloid Edison cylinder. Comparisons are presented with stylus playback of the samples and with a digitally re-mastered version of an original magnetic recording. There is also a more extensive implementation of this approach, with dedicated hardware and software.

  20. Damaged road extracting with high-resolution aerial image of post-earthquake

    NASA Astrophysics Data System (ADS)

    Zheng, Zezhong; Pu, Chengjun; Zhu, Mingcang; Xia, Jun; Zhang, Xiang; Liu, Yalan; Li, Jiang

    2015-12-01

    With the rapid development of earth observation technology, remote sensing images have played more important roles, because the high resolution images can provide the original data for object recognition, disaster investigation, and so on. When a disastrous earthquake breaks out, a large number of roads could be damaged instantly. There are a lot of approaches about road extraction, such as region growing, gray threshold, and k-means clustering algorithm. We could not obtain the undamaged roads with these approaches, if the trees or their shadows along the roads are difficult to be distinguished from the damaged road. In the paper, a method is presented to extract the damaged road with high resolution aerial image of post-earthquake. Our job is to extract the damaged road and the undamaged with the aerial image. We utilized the mathematical morphology approach and the k-means clustering algorithm to extract the road. Our method was composed of four ingredients. Firstly, the mathematical morphology filter operators were employed to remove the interferences from the trees or their shadows. Secondly, the k-means algorithm was employed to derive the damaged segments. Thirdly, the mathematical morphology approach was used to extract the undamaged road; Finally, we could derive the damaged segments by overlaying the road networks of pre-earthquake. Our results showed that the earthquake, broken in Yaan, was disastrous for the road, Therefore, we could take more measures to keep it clear.

  1. Gabor-domain optical coherence microscopy with integrated dual-axis MEMS scanner for fast 3D imaging and metrology

    NASA Astrophysics Data System (ADS)

    Canavesi, Cristina; Cogliati, Andrea; Hayes, Adam; Santhanam, Anand P.; Tankam, Patrice; Rolland, Jannick P.

    2015-10-01

    Fast, robust, nondestructive 3D imaging is needed for characterization of microscopic structures in industrial and clinical applications. A custom micro-electromechanical system (MEMS)-based 2D scanner system was developed to achieve 55 kHz A-scan acquisition in a Gabor-domain optical coherence microscopy (GD-OCM) instrument with a novel multilevel GPU architecture for high-speed imaging. GD-OCM yields high-definition volumetric imaging with dynamic depth of focusing through a bio-inspired liquid lens-based microscope design, which has no moving parts and is suitable for use in a manufacturing setting or in a medical environment. A dual-axis MEMS mirror was chosen to replace two single-axis galvanometer mirrors; as a result, the astigmatism caused by the mismatch between the optical pupil and the scanning location was eliminated and a 12x reduction in volume of the scanning system was achieved. Imaging at an invariant resolution of 2 μm was demonstrated throughout a volume of 1 × 1 × 0.6 mm3, acquired in less than 2 minutes. The MEMS-based scanner resulted in improved image quality, increased robustness and lighter weight of the system - all factors that are critical for on-field deployment. A custom integrated feedback system consisting of a laser diode and a position-sensing detector was developed to investigate the impact of the resonant frequency of the MEMS and the driving signal of the scanner on the movement of the mirror. Results on the metrology of manufactured materials and characterization of tissue samples with GD-OCM are presented.

  2. Overview of Mask Metrology

    NASA Astrophysics Data System (ADS)

    Rice, Bryan J.; Jindal, Vibhu; Lin, C. C.; Harris-Jones, Jenah; Kwon, Hyuk Joo; Ma, Hsing-Chien; Goldstein, Michael; Chan, Yau-Wai; Goodwin, Frank

    2011-11-01

    blanks. Complementary to Auger analysis, TEM provides ultimate resolution in the defect imaging of sub-nanometer structures. Crystalline and phase information generated by this metrology technique also indicates the sources of defects. SEMATECH's TEM capability is further equipped with energy dispersive X-ray spectroscopy (EDS) and electron energy loss spectroscopy (EELS), which provide higher analytical power than similar techniques in traditional secondary electron microscopy (SEM). This paper will describe SEMATECH's comprehensive effort to develop robust inspection of EUV mask defects. We will discuss the development of hardware and procedures for inspecting particles 70 nm and smaller. This paper will also outline challenges in the metrology of current defects on EUV mask blanks and metrology issues that arise with increasingly smaller defects.

  3. Point cloud generation from aerial image data acquired by a quadrocopter type micro unmanned aerial vehicle and a digital still camera.

    PubMed

    Rosnell, Tomi; Honkavaara, Eija

    2012-01-01

    The objective of this investigation was to develop and investigate methods for point cloud generation by image matching using aerial image data collected by quadrocopter type micro unmanned aerial vehicle (UAV) imaging systems. Automatic generation of high-quality, dense point clouds from digital images by image matching is a recent, cutting-edge step forward in digital photogrammetric technology. The major components of the system for point cloud generation are a UAV imaging system, an image data collection process using high image overlaps, and post-processing with image orientation and point cloud generation. Two post-processing approaches were developed: one of the methods is based on Bae Systems' SOCET SET classical commercial photogrammetric software and another is built using Microsoft(®)'s Photosynth™ service available in the Internet. Empirical testing was carried out in two test areas. Photosynth processing showed that it is possible to orient the images and generate point clouds fully automatically without any a priori orientation information or interactive work. The photogrammetric processing line provided dense and accurate point clouds that followed the theoretical principles of photogrammetry, but also some artifacts were detected. The point clouds from the Photosynth processing were sparser and noisier, which is to a large extent due to the fact that the method is not optimized for dense point cloud generation. Careful photogrammetric processing with self-calibration is required to achieve the highest accuracy. Our results demonstrate the high performance potential of the approach and that with rigorous processing it is possible to reach results that are consistent with theory. We also point out several further research topics. Based on theoretical and empirical results, we give recommendations for properties of imaging sensor, data collection and processing of UAV image data to ensure accurate point cloud generation. PMID:22368479

  4. Point Cloud Generation from Aerial Image Data Acquired by a Quadrocopter Type Micro Unmanned Aerial Vehicle and a Digital Still Camera

    PubMed Central

    Rosnell, Tomi; Honkavaara, Eija

    2012-01-01

    The objective of this investigation was to develop and investigate methods for point cloud generation by image matching using aerial image data collected by quadrocopter type micro unmanned aerial vehicle (UAV) imaging systems. Automatic generation of high-quality, dense point clouds from digital images by image matching is a recent, cutting-edge step forward in digital photogrammetric technology. The major components of the system for point cloud generation are a UAV imaging system, an image data collection process using high image overlaps, and post-processing with image orientation and point cloud generation. Two post-processing approaches were developed: one of the methods is based on Bae Systems’ SOCET SET classical commercial photogrammetric software and another is built using Microsoft®’s Photosynth™ service available in the Internet. Empirical testing was carried out in two test areas. Photosynth processing showed that it is possible to orient the images and generate point clouds fully automatically without any a priori orientation information or interactive work. The photogrammetric processing line provided dense and accurate point clouds that followed the theoretical principles of photogrammetry, but also some artifacts were detected. The point clouds from the Photosynth processing were sparser and noisier, which is to a large extent due to the fact that the method is not optimized for dense point cloud generation. Careful photogrammetric processing with self-calibration is required to achieve the highest accuracy. Our results demonstrate the high performance potential of the approach and that with rigorous processing it is possible to reach results that are consistent with theory. We also point out several further research topics. Based on theoretical and empirical results, we give recommendations for properties of imaging sensor, data collection and processing of UAV image data to ensure accurate point cloud generation. PMID:22368479

  5. A multi-scale registration of urban aerial image with airborne lidar data

    NASA Astrophysics Data System (ADS)

    Huang, Shuo; Chen, Siying; Zhang, Yinchao; Guo, Pan; Chen, He

    2015-11-01

    This paper presented a multi-scale progressive registration method of airborne LiDAR data with aerial image. The cores of the proposed method lie in the coarse registration with road networks and the fine registration method using regularized building corners. During the two-stage registration, the exterior orientation parameters (EOP) are continually refined. By validation of the actual flight data of Dunhuang, the experimental result shows that the proposed method can obtain accurate results with low-precision initial EOP, also improve the automatic degree of registration.

  6. Density estimation in aerial images of large crowds for automatic people counting

    NASA Astrophysics Data System (ADS)

    Herrmann, Christian; Metzler, Juergen

    2013-05-01

    Counting people is a common topic in the area of visual surveillance and crowd analysis. While many image-based solutions are designed to count only a few persons at the same time, like pedestrians entering a shop or watching an advertisement, there is hardly any solution for counting large crowds of several hundred persons or more. We addressed this problem previously by designing a semi-automatic system being able to count crowds consisting of hundreds or thousands of people based on aerial images of demonstrations or similar events. This system requires major user interaction to segment the image. Our principle aim is to reduce this manual interaction. To achieve this, we propose a new and automatic system. Besides counting the people in large crowds, the system yields the positions of people allowing a plausibility check by a human operator. In order to automatize the people counting system, we use crowd density estimation. The determination of crowd density is based on several features like edge intensity or spatial frequency. They indicate the density and discriminate between a crowd and other image regions like buildings, bushes or trees. We compare the performance of our automatic system to the previous semi-automatic system and to manual counting in images. By counting a test set of aerial images showing large crowds containing up to 12,000 people, the performance gain of our new system will be measured. By improving our previous system, we will increase the benefit of an image-based solution for counting people in large crowds.

  7. Analyzing Spectral Characteristics of Shadow Area from ADS-40 High Radiometric Resolution Aerial Images

    NASA Astrophysics Data System (ADS)

    Hsieh, Yi-Ta; Wu, Shou-Tsung; Chen, Chaur-Tzuhn; Chen, Jan-Chang

    2016-06-01

    The shadows in optical remote sensing images are regarded as image nuisances in numerous applications. The classification and interpretation of shadow area in a remote sensing image are a challenge, because of the reduction or total loss of spectral information in those areas. In recent years, airborne multispectral aerial image devices have been developed 12-bit or higher radiometric resolution data, including Leica ADS-40, Intergraph DMC. The increased radiometric resolution of digital imagery provides more radiometric details of potential use in classification or interpretation of land cover of shadow areas. Therefore, the objectives of this study are to analyze the spectral properties of the land cover in the shadow areas by ADS-40 high radiometric resolution aerial images, and to investigate the spectral and vegetation index differences between the various shadow and non-shadow land covers. According to research findings of spectral analysis of ADS-40 image: (i) The DN values in shadow area are much lower than in nonshadow area; (ii) DN values received from shadowed areas that will also be affected by different land cover, and it shows the possibility of land cover property retrieval as in nonshadow area; (iii) The DN values received from shadowed regions decrease in the visible band from short to long wavelengths due to scattering; (iv) The shadow area NIR of vegetation category also shows a strong reflection; (v) Generally, vegetation indexes (NDVI) still have utility to classify the vegetation and non-vegetation in shadow area. The spectral data of high radiometric resolution images (ADS-40) is potential for the extract land cover information of shadow areas.

  8. New Approach for Segmentation and Extraction of Single Tree from Point Clouds Data and Aerial Images

    NASA Astrophysics Data System (ADS)

    Homainejad, A. S.

    2016-06-01

    This paper addresses a new approach for reconstructing a 3D model from single trees via Airborne Laser Scanners (ALS) data and aerial images. The approach detects and extracts single tree from ALS data and aerial images. The existing approaches are able to provide bulk segmentation from a group of trees; however, some methods focused on detection and extraction of a particular tree from ALS and images. Segmentation of a single tree within a group of trees is mostly a mission impossible since the detection of boundary lines between the trees is a tedious job and basically it is not feasible. In this approach an experimental formula based on the height of the trees was developed and applied in order to define the boundary lines between the trees. As a result, each single tree was segmented and extracted and later a 3D model was created. Extracted trees from this approach have a unique identification and attribute. The output has application in various fields of science and engineering such as forestry, urban planning, and agriculture. For example in forestry, the result can be used for study in ecologically diverse, biodiversity and ecosystem.

  9. D Classification of Crossroads from Multiple Aerial Images Using Markov Random Fields

    NASA Astrophysics Data System (ADS)

    Kosov, S.; Rottensteiner, F.; Heipke, C.; Leitloff, J.; Hinz, S.

    2012-08-01

    The precise classification and reconstruction of crossroads from multiple aerial images is a challenging problem in remote sensing. We apply the Markov Random Fields (MRF) approach to this problem, a probabilistic model that can be used to consider context in classification. A simple appearance-based model is combined with a probabilistic model of the co-occurrence of class label at neighbouring image sites to distinguish up to 14 different classes that are relevant for scenes containing crossroads. The parameters of these models are learnt from training data. We use multiple overlap aerial images to derive a digital surface model (DSM) and a true orthophoto without moving cars. From the DSM and the orthophoto we derive feature vectors that are used in the classification. One of the features is a car confidence value that is supposed to support the classification when the road surface is occluded by static cars. Our approach is evaluated on a dataset of airborne photos of an urban area by a comparison of the results to reference data. Whereas the method has problems in distinguishing classes having a similar appearance, it is shown to produce promising results if a reduced set of classes is considered, yielding an overall classification accuracy of 74.8%.

  10. Fractal methods for extracting artificial objects from the unmanned aerial vehicle images

    NASA Astrophysics Data System (ADS)

    Markov, Eugene

    2016-04-01

    Unmanned aerial vehicles (UAVs) have become used increasingly in earth surface observations, with a special interest put into automatic modes of environmental control and recognition of artificial objects. Fractal methods for image processing well detect the artificial objects in digital space images but were not applied previously to the UAV-produced imagery. Parameters of photography, on-board equipment, and image characteristics differ considerably for spacecrafts and UAVs. Therefore, methods that work properly with space images can produce different results for the UAVs. In this regard, testing the applicability of fractal methods for the UAV-produced images and determining the optimal range of parameters for these methods represent great interest. This research is dedicated to the solution of this problem. Specific features of the earth's surface images produced with UAVs are described in the context of their interpretation and recognition. Fractal image processing methods for extracting artificial objects are described. The results of applying these methods to the UAV images are presented.

  11. Nonlinear Estimation Approach to Real-Time Georegistration from Aerial Images

    NASA Technical Reports Server (NTRS)

    Bayard, David S.; Padgett, Curtis W.

    2012-01-01

    When taking aerial images, it is important to know locations of specific points of interest in an Earth-centered coordinate system (latitude, longitude, height). The correspondence between a pixel location in the image and its Earth coordinate is known as georegistration. There are two main technical challenges arising in the intended application. The first is that no known features are assumed to be available in any of the images. The second is that the intended applications are real time. Here, images are taken at regular intervals (i.e. once per second), and it is desired to make decisions in real time based on the geolocation of specific objects seen in the images as they arrive. This is in sharp contrast to most current methods for geolocation that operate "after-the-fact" by processing, on the ground, a database of stored images using computationally intensive methods. The solution is a nonlinear estimation algorithm that combines processed realtime camera images with vehicle position and attitude information ob tained from an onboard GPS receiver. This approach provides accurate georegistration estimates (latitude, longitude, height) of arbitrary features and/or points of interest seen in the camera images. This solves the georegistration problem at the modest cost of augmenting the camera information with a GPS receiver carried onboard the vehicle.

  12. Automatic aerial image shadow detection through the hybrid analysis of RGB and HIS color space

    NASA Astrophysics Data System (ADS)

    Wu, Jun; Li, Huilin; Peng, Zhiyong

    2015-12-01

    This paper presents our research on automatic shadow detection from high-resolution aerial image through the hybrid analysis of RGB and HIS color space. To this end, the spectral characteristics of shadow are firstly discussed and three kinds of spectral components including the difference between normalized blue and normalized red component - BR, intensity and saturation components are selected as criterions to obtain initial segmentation of shadow region (called primary segmentation). After that, within the normalized RGB color space and HIS color space, the shadow region is extracted again (called auxiliary segmentation) using the OTSU operation, respectively. Finally, the primary segmentation and auxiliary segmentation are combined through a logical AND-connection operation to obtain reliable shadow region. In this step, small shadow areas are removed from combined shadow region and morphological algorithms are apply to fill small holes as well. The experimental results show that the proposed approach can effectively detect the shadow region from high-resolution aerial image and in high degree of automaton.

  13. Computational inspection applied to a mask inspection system with advanced aerial imaging capability

    NASA Astrophysics Data System (ADS)

    Pang, Linyong; Peng, Danping; He, Lin; Chen, Dongxue; Dam, Thuc; Tolani, Vikram; Tam, Aviram; Staud, Wolf

    2010-03-01

    At the most advanced technology nodes, such as 32nm and 22nm, aggressive OPC and Sub-Resolution Assist Features (SRAFs) are required. However, their use results in significantly increased mask complexity, challenging mask defect dispositioning more than ever. To address these challenges in mask inspection and defect dispositioning, new mask inspection technologies have been developed that not only provide high resolution masks imaged at the same wavelength as the scanner, but that also provide aerial images by using both: software simulation and hardware emulation. The original mask patterns stored by the optics of mask inspection systems can be recovered using a patented algorithm based on the Level Set Method. More accurate lithography simulation models can be used to further evaluate defects on simulated resist patterns using the recovered mask pattern in high resolution and aerial mode. An automated defect classification based on lithography significance and local CD changes is also developed to disposition tens of thousands of potential defects in minutes, so that inspection throughput is not impacted.

  14. Aerial Image Microscopes for the Inspection of Defects in EUV Masks

    SciTech Connect

    Barty, A; Taylor, J S; Hudyma, R; Spiller, E; Sweeney, D W; Shelden, G; Urbach, J-P

    2002-10-22

    The high volume inspection equipment currently available to support development of EUV blanks is non-actinic. The same is anticipated for patterned EUV mask inspection. Once potential defects are identified and located by such non-actinic inspection techniques, it is essential to have instrumentation to perform detailed characterization, and if repairs are performed, re-evaluation. The ultimate metric for the acceptance or rejection of a mask due to a defect, is the wafer level impact. Thus measuring the aerial image for the site under question is required. An EUV Aerial Image Microscope (''AIM'') similar to the current AIM tools for 248nm and 193nm exposure wavelength is the natural solution for this task. Due to the complicated manufacturing process of EUV blanks, AIM measurements might also be beneficial to accurately assessing the severity of a blank defect. This is an additional application for an EUV AIM as compared to today's use In recognition of the critical role of an EUV AIM for the successful implementation of EUV blank and mask supply, International SEMATECH initiated this design study with the purpose to define the technical requirements for accurately simulating EUV scanner performance, demonstrating the feasibility to meet these requirements and to explore various technical approaches to building an EUV AIM tool.

  15. Solving next generation (1x node) metrology challenges using advanced CDSEM capabilities: tilt, high energy and backscatter imaging

    NASA Astrophysics Data System (ADS)

    Zhang, Xiaoxiao; Snow, Patrick W.; Vaid, Alok; Solecky, Eric; Zhou, Hua; Ge, Zhenhua; Yasharzade, Shay; Shoval, Ori; Adan, Ofer; Schwarzband, Ishai; Bar-Zvi, Maayan

    2015-03-01

    Traditional metrology solutions are facing a range of challenges at the 1X node such as three dimensional (3D) measurement capabilities, shrinking overlay and critical dimension (CD) error budgets driven by multi-patterning and via in trench CD measurements. Hybrid metrology offers promising new capabilities to address some of these challenges but it will take some time before fully realized. This paper explores new capabilities currently offered on the in-line Critical Dimension Scanning Electron Microscope (CD-SEM) to address these challenges and enable the CD-SEM to move beyond measuring bottom CD using top down imaging. Device performance is strongly correlated with Fin geometry causing an urgent need for 3D measurements. New beam tilting capabilities enhance the ability to make 3D measurements in the front-end-of-line (FEOL) of the metal gate FinFET process in manufacturing. We explore these new capabilities for measuring Fin height and build upon the work communicated last year at SPIE1. Furthermore, we extend the application of the tilt beam to the back-end-of-line (BEOL) trench depth measurement and demonstrate its capability in production targeting replacement of the existing Atomic Force Microscope (AFM) measurements by including the height measurement in the existing CDSEM recipe to reduce fab cycle time. In the BEOL, another increasingly challenging measurement for the traditional CD-SEM is the bottom CD of the self-aligned via (SAV) in a trench first via last (TFVL) process. Due to the extremely high aspect ratio of the structure secondary electron (SE) collection from the via bottom is significantly reduced requiring the use of backscatter electrons (BSE) to increase the relevant image quality. Even with this solution, the resulting images are difficult to measure with advanced technology nodes. We explore new methods to increase measurement robustness and combine this with novel segmentation-based measurement algorithm generated specifically for BSE

  16. a Robust Matching Method for Unmmaned Aerial Vehicle Images with Different Viewpoint Angles Based on Regional Coherency

    NASA Astrophysics Data System (ADS)

    Shao, Z.; Li, C.; Yang, N.

    2015-08-01

    One of the main challenges confronting high-resolution remote sensing image matching is how to address the issue of geometric deformation between images, especially when the images are obtained from different viewpoints. In this paper, a robust matching method for Unmanned Aerial Vehicle images of different viewpoint angles based on regional coherency is proposed. The literature on the geometric transform analysis reveals that if transformations between different pixel pairs are different, they can't be expressed by a uniform affine transform. While for the same real scene, if the instantaneous field of view or the target depth changes is small, transformation between pixels in the whole image can be approximated by an affine transform. On the basis of this analysis, a region coherency matching method for Unmanned Aerial Vehicle images is proposed. In the proposed method, the simplified mapping from image view change to scale change and rotation change has been derived. Through this processing, the matching between view change images can be converted into the matching between rotation and scale changed images. In the method, firstly local image regions are detected and view changes between these local regions are mapped to rotation and scale change by performing local region simulation. And then, point feature detection and matching are implemented in the simulated image regions. Finally, a group of Unmanned Aerial Vehicle images are adopted to verify the performance of proposed matching method respectively, and a comparative analysis with other methods demonstrates the effectiveness of the proposed method.

  17. Feature-based registration of historical aerial images by Area Minimization

    NASA Astrophysics Data System (ADS)

    Nagarajan, Sudhagar; Schenk, Toni

    2016-06-01

    The registration of historical images plays a significant role in assessing changes in land topography over time. By comparing historical aerial images with recent data, geometric changes that have taken place over the years can be quantified. However, the lack of ground control information and precise camera parameters has limited scientists' ability to reliably incorporate historical images into change detection studies. Other limitations include the methods of determining identical points between recent and historical images, which has proven to be a cumbersome task due to continuous land cover changes. Our research demonstrates a method of registering historical images using Time Invariant Line (TIL) features. TIL features are different representations of the same line features in multi-temporal data without explicit point-to-point or straight line-to-straight line correspondence. We successfully determined the exterior orientation of historical images by minimizing the area formed between corresponding TIL features in recent and historical images. We then tested the feasibility of the approach with synthetic and real data and analyzed the results. Based on our analysis, this method shows promise for long-term 3D change detection studies.

  18. An aerial remote sensing image's mosaic approach using multi-layer wavelet fusion based on structure similarity

    NASA Astrophysics Data System (ADS)

    Wei, Li; Shi, Junsheng; Huang, Xiaoqiao; Ding, Huimei

    2015-12-01

    In order to solve the problems that image's entropy of information decline obviously and boundary line phenomenon appear obviously in the processing of aerial remote sensing image's mosaic, an image mosaic approach is presented in this paper, which uses wavelet image fusion based on structure similarity and is capable of creating seamless mosaics in real-time. The approach consists of three steps. First, the overlapping area of two aerial images is extracted. Then, the two overlapping area images are fused adaptively by the method of multi-layer wavelet decomposition based on the structure similarity and appointed regulation. Finally, weighted average fusion is used again to avoid the visible boundary line for the both sides of the boundary of the above fusion image. Experimental results show the entropy of information, sharpness and standard deviation have been improved significantly, and the boundary line has been eliminated observably.

  19. Quantitative evaluation of mask phase defects from through-focus EUV aerial images

    SciTech Connect

    Mochi, Iacopo; Yamazoe, Kenji; Neureuther, Andrew; Goldberg, Kenneth A.

    2011-02-21

    Mask defects inspection and imaging is one of the most important issues for any pattern transfer lithography technology. This is especially true for EUV lithography where the wavelength-specific properties of masks and defects necessitate actinic inspection for a faithful prediction of defect printability and repair performance. In this paper we will present a technique to obtain a quantitative characterization of mask phase defects from EUV aerial images. We apply this technique to measure the aerial image phase of native defects on a blank mask, measured with the SEMATECH Berkeley Actinic Inspection Tool (AIT) an EUV zoneplate microscope that operates at Lawrence Berkeley National Laboratory. The measured phase is compared with predictions made from AFM top-surface measurements of those defects. While amplitude defects are usually easy to recognize and quantify with standard inspection techniques like scanning electron microscopy (SEM), defects or structures that have a phase component can be much more challenging to inspect. A phase defect can originate from the substrate or from any level of the multilayer. In both cases its effect on the reflected field is not directly related to the local topography of the mask surface, but depends on the deformation of the multilayer structure. Using the AIT, we have previously showed that EUV inspection provides a faithful and reliable way to predict the appearance of mask defect on the printed wafer; but to obtain a complete characterization of the defect we need to evaluate quantitatively its phase component. While aerial imaging doesn't provide a direct measurement of the phase of the object, this information is encoded in the through focus evolution of the image intensity distribution. Recently we developed a technique that allows us to extract the complex amplitude of EUV mask defects using two aerial images from different focal planes. The method for the phase reconstruction is derived from the Gerchberg-Saxton (GS

  20. Demonstration of a multimode longwave infrared imaging system on an unmanned aerial vehicle

    NASA Astrophysics Data System (ADS)

    Jones, Terry L.; Romanski, John G.; Buckley, John J.; Girata, Anthony J.

    1999-07-01

    The RISTA II sensor was integrated into the Altus Unmanned Aerial Vehicle (UAV) and flown over Camp Roberts and Ft. Hunter Ligget, CA in July 1998. The RISTA II demonstration system consisted of a long-wave IR imager, a digital data link, and a ground processing facility (GPF) containing an aided target recognizer, data storage devices, and operator workstations. Imagery was compressed on the UAV and sent on the GPF over a 10.71 Mbit per second digital data link. Selected image frames from the GPF were sent near real-time over a T1 link to observers in Rosslyn, VA. The sensor operated in a variety of scanning and framing modes. Both manual and automatic sensor pointing were demonstrated. Seven flights were performed at altitudes up to 7500m and range sup to 60 km from the GPF. Applicability to numerous military and civilian scenarios was demonstrated.

  1. Modelling and representation issues in automated feature extraction from aerial and satellite images

    NASA Astrophysics Data System (ADS)

    Sowmya, Arcot; Trinder, John

    New digital systems for the processing of photogrammetric and remote sensing images have led to new approaches to information extraction for mapping and Geographic Information System (GIS) applications, with the expectation that data can become more readily available at a lower cost and with greater currency. Demands for mapping and GIS data are increasing as well for environmental assessment and monitoring. Hence, researchers from the fields of photogrammetry and remote sensing, as well as computer vision and artificial intelligence, are bringing together their particular skills for automating these tasks of information extraction. The paper will review some of the approaches used in knowledge representation and modelling for machine vision, and give examples of their applications in research for image understanding of aerial and satellite imagery.

  2. X-Ray Grating Interferometry for Phase-Contrast Imaging and Optics Metrology Applications

    NASA Astrophysics Data System (ADS)

    David, Christian; Rutishauser, Simon; Thüring, Thomas; Donath, Tilman; Stampanoni, Marco

    2010-04-01

    We report on a hard x-ray interferometry technique based on diffraction gratings fabricated using microlithography techniques. Compared to other x-ray phase-contrast imaging methods, the grating interferometer only has very moderate requirements in terms of coherence. This makes it possible to use the method with standard x-ray tubes, which opens up a huge range of applications e.g. in medical imaging.

  3. Three-dimensional building roof boundary extraction using high-resolution aerial image and LiDAR data

    NASA Astrophysics Data System (ADS)

    Dal Poz, A. P.; Fazan, Antonio J.

    2014-10-01

    This paper presents a semiautomatic method for rectilinear building roof boundary extraction, based on the integration of high-resolution aerial image and LiDAR (Light Detection and Ranging) data. The proposed method is formulated as an optimization problem, in which a snakes-based objective function is developed to represent the building roof boundaries in an object-space coordinate system. Three-dimensional polylines representing building roof boundaries are obtained by optimizing the objective function using the dynamic programming optimization technique. The results of our experiments showed that the proposed method satisfactorily performed the task of extracting different building roof boundaries from aerial image and LiDAR data.

  4. Object-based Image Classification of Arctic Sea Ice and Melt Ponds through Aerial Photos

    NASA Astrophysics Data System (ADS)

    Miao, X.; Xie, H.; Li, Z.; Lei, R.

    2013-12-01

    The last six years have marked the lowest Arctic summer sea ice extents in the modern era, with a new record summer minimum (3.4 million km2) set on 13 September 2012. It has been predicted that the Arctic could be free of summer ice within the next 25-30. The loss of Arctic summer ice could have serious consequences, such as higher water temperature due to the positive feedback of albedo, more powerful and frequent storms, rising sea levels, diminished habitats for polar animals, and more pollution due to fossil fuel exploitation and/ or increased traffic through the Northwest/ Northeast Passage. In these processes, melt ponds play an important role in Earth's radiation balance since they strongly absorb solar radiation rather than reflecting it as snow and ice do. Therefore, it is necessary to develop the ability of predicting the sea ice/ melt pond extents and space-time evolution, which is pivotal to prepare for the variation and uncertainty of the future environment, political, economic, and military needs. A lot of efforts have been put into Arctic sea ice modeling to simulate sea ice processes. However, these sea ice models were initiated and developed based on limited field surveys, aircraft or satellite image data. Therefore, it is necessary to collect high resolution sea ice aerial photo in a systematic way to tune up, validate, and improve models. Currently there are many sea ice aerial photos available, such as Chinese Arctic Exploration (CHINARE 2008, 2010, 2012), SHEBA 1998 and HOTRAX 2005. However, manually delineating of sea ice and melt pond from these images is time-consuming and labor-intensive. In this study, we use the object-based remote sensing classification scheme to extract sea ice and melt ponds efficiently from 1,727 aerial photos taken during the CHINARE 2010. The algorithm includes three major steps as follows. (1) Image segmentation groups the neighboring pixels into objects according to the similarity of spectral and texture

  5. Multi-Scale Matching for the Automatic Location of Control Points in Large Scale Aerial Images Using Terrestrial Scenes

    NASA Astrophysics Data System (ADS)

    Berveglieri, A.; Tommaselli, A. M. G.

    2014-03-01

    A technique to automatically locate Ground Control Points (GCPs) in large aerial images is presented considering the availability of low accuracy direct georeferencing data. The approach is based on image chips of GCPs extracted from vertical terrestrial images. A strategy combining image matching techniques was implemented to select correct matches. These matches were used to define a 2D transformation with which the GCP is projected close to its correct position, reducing the search space in the aerial image. Area-based matching with some refinements is used to locate GCPs with sub-pixel precision. Experiments were performed with multi-scale images and assessed with a bundle block adjustment simulating an indirect sensor orientation. The accuracy analysis was accomplished based on discrepancies obtained from GCPs and check points. The results were better than interactive measurements and a planimetric accuracy of 1/5 of the Ground Sample Distance (GSD) for the check points was achieved.

  6. Semi-automated analysis of high-resolution aerial images to quantify docks in glacial lakes

    NASA Astrophysics Data System (ADS)

    Beck, Marcus W.; Vondracek, Bruce; Hatch, Lorin K.; Vinje, Jason

    2013-07-01

    Lake resources can be negatively affected by environmental stressors originating from multiple sources and different spatial scales. Shoreline development, in particular, can negatively affect lake resources through decline in habitat quality, physical disturbance, and impacts on fisheries. The development of remote sensing techniques that efficiently characterize shoreline development in a regional context could greatly improve management approaches for protecting and restoring lake resources. The goal of this study was to develop an approach using high-resolution aerial photographs to quantify and assess docks as indicators of shoreline development. First, we describe a dock analysis workflow that can be used to quantify the spatial extent of docks using aerial images. Our approach incorporates pixel-based classifiers with object-based techniques to effectively analyze high-resolution digital imagery. Second, we apply the analysis workflow to quantify docks for 4261 lakes managed by the Minnesota Department of Natural Resources. Overall accuracy of the analysis results was 98.4% (87.7% based on K^) after manual post-processing. The analysis workflow was also 74% more efficient than the time required for manual digitization of docks. These analyses have immediate relevance for resource planning in Minnesota, whereas the dock analysis workflow could be used to quantify shoreline development in other regions with comparable imagery. These data can also be used to better understand the effects of shoreline development on aquatic resources and to evaluate the effects of shoreline development relative to other stressors.

  7. Aerial image measurement technique for automated reticle defect disposition (ARDD) in wafer fabs

    NASA Astrophysics Data System (ADS)

    Zibold, Axel M.; Schmid, Rainer M.; Stegemann, B.; Scheruebl, Thomas; Harnisch, Wolfgang; Kobiyama, Yuji

    2004-08-01

    The Aerial Image Measurement System (AIMS)* for 193 nm lithography emulation has been brought into operation successfully worldwide. A second generation system comprising 193 nm AIMS capability, mini-environment and SMIF, the AIMS fab 193 plus is currently introduced into the market. By adjustment of numerical aperture (NA), illumination type and partial illumination coherence to match the conditions in 193 nm steppers or scanners, it can emulate the exposure tool for any type of reticles like binary, OPC and PSM down to the 65 nm node. The system allows a rapid prediction of wafer printability of defects or defect repairs, and critical features, like dense patterns or contacts on the masks without the need to perform expensive image qualification consisting of test wafer exposures followed by SEM measurements. Therefore, AIMS is a mask quality verification standard for high-end photo masks and established in mask shops worldwide. The progress on the AIMS technology described in this paper will highlight that besides mask shops there will be a very beneficial use of the AIMS in the wafer fab and we propose an Automated Reticle Defect Disposition (ARDD) process. With smaller nodes, where design rules are 65 nm or less, it is expected that smaller defects on reticles will occur in increasing numbers in the wafer fab. These smaller mask defects will matter more and more and become a serious yield limiting factor. With increasing mask prices and increasing number of defects and severability on reticles it will become cost beneficial to perform defect disposition on the reticles in wafer production. Currently ongoing studies demonstrate AIMS benefits for wafer fab applications. An outlook will be given for extension of 193 nm aerial imaging down to the 45 nm node based on emulation of immersion scanners.

  8. Three-Dimensional Building Reconstruction Using Images Obtained by Unmanned Aerial Vehicles

    NASA Astrophysics Data System (ADS)

    Wefelscheid, C.; Hänsch, R.; Hellwich, O.

    2011-09-01

    Unmanned Aerial Vehicles (UAVs) offer several new possibilities in a wide range of applications. One example is the 3D reconstruction of buildings. In former times this was either restricted by earthbound vehicles to the reconstruction of facades or by air-borne sensors to generate only very coarse building models. This paper describes an approach for fully automatic image-based 3D reconstruction of buildings using UAVs. UAVs are able to observe the whole 3D scene and to capture images of the object of interest from completely different perspectives. The platform used by this work is a Falcon 8 octocopter from Ascending Technologies. A slightly modified high-resolution consumer camera serves as sensor for data acquisition. The final 3D reconstruction is computed offline after image acquisition and follows a reconstruction process originally developed for image sequences obtained by earthbound vehicles. The per- formance of the described method is evaluated on benchmark datasets showing that the achieved accuracy is high and even comparable with Light Detection and Ranging (LIDAR). Additionally, the results of the application of the complete processing-chain starting at image acquisition and ending in a dense surface-mesh are presented and discussed.

  9. Detection of Laurel Wilt Disease in Avocado Using Low Altitude Aerial Imaging

    PubMed Central

    de Castro, Ana I.; Ehsani, Reza; Ploetz, Randy C.; Crane, Jonathan H.; Buchanon, Sherrie

    2015-01-01

    Laurel wilt is a lethal disease of plants in the Lauraceae plant family, including avocado (Persea americana). This devastating disease has spread rapidly along the southeastern seaboard of the United States and has begun to affect commercial avocado production in Florida. The main objective of this study was to evaluate the potential to discriminate laurel wilt-affected avocado trees using aerial images taken with a modified camera during helicopter surveys at low-altitude in the commercial avocado production area. The ability to distinguish laurel wilt-affected trees from other factors that produce similar external symptoms was also studied. RmodGB digital values of healthy trees and laurel wilt-affected trees, as well as fruit stress and vines covering trees were used to calculate several vegetation indices (VIs), band ratios, and VI combinations. These indices were subjected to analysis of variance (ANOVA) and an M-statistic was performed in order to quantify the separability of those classes. Significant differences in spectral values among laurel wilt affected and healthy trees were observed in all vegetation indices calculated, although the best results were achieved with Excess Red (ExR), (Red–Green) and Combination 1 (COMB1) in all locations. B/G showed a very good potential for separate the other factors with symptoms similar to laurel wilt-affected trees, such as fruit stress and vines covering trees, from laurel wilt-affected trees. These consistent results prove the usefulness of using a modified camera (RmodGB) to discriminate laurel wilt-affected avocado trees from healthy trees, as well as from other factors that cause the same symptoms and suggest performing the classification in further research. According to our results, ExR and B/G should be utilized to develop an algorithm or decision rules to classify aerial images, since they showed the highest capacity to discriminate laurel wilt-affected trees. This methodology may allow the rapid

  10. Detection of laurel wilt disease in avocado using low altitude aerial imaging.

    PubMed

    de Castro, Ana I; Ehsani, Reza; Ploetz, Randy C; Crane, Jonathan H; Buchanon, Sherrie

    2015-01-01

    Laurel wilt is a lethal disease of plants in the Lauraceae plant family, including avocado (Persea americana). This devastating disease has spread rapidly along the southeastern seaboard of the United States and has begun to affect commercial avocado production in Florida. The main objective of this study was to evaluate the potential to discriminate laurel wilt-affected avocado trees using aerial images taken with a modified camera during helicopter surveys at low-altitude in the commercial avocado production area. The ability to distinguish laurel wilt-affected trees from other factors that produce similar external symptoms was also studied. RmodGB digital values of healthy trees and laurel wilt-affected trees, as well as fruit stress and vines covering trees were used to calculate several vegetation indices (VIs), band ratios, and VI combinations. These indices were subjected to analysis of variance (ANOVA) and an M-statistic was performed in order to quantify the separability of those classes. Significant differences in spectral values among laurel wilt affected and healthy trees were observed in all vegetation indices calculated, although the best results were achieved with Excess Red (ExR), (Red-Green) and Combination 1 (COMB1) in all locations. B/G showed a very good potential for separate the other factors with symptoms similar to laurel wilt-affected trees, such as fruit stress and vines covering trees, from laurel wilt-affected trees. These consistent results prove the usefulness of using a modified camera (RmodGB) to discriminate laurel wilt-affected avocado trees from healthy trees, as well as from other factors that cause the same symptoms and suggest performing the classification in further research. According to our results, ExR and B/G should be utilized to develop an algorithm or decision rules to classify aerial images, since they showed the highest capacity to discriminate laurel wilt-affected trees. This methodology may allow the rapid detection

  11. Comparison of event-based landslide inventory maps obtained interpreting satellite images and aerial photographs

    NASA Astrophysics Data System (ADS)

    Fiorucci, Federica; Cardinali, Mauro; Carlà Roberto; Mondini, Alessandro; Santurri, Leonardo; Guzzetti, Fausto

    2010-05-01

    Landslide inventory maps are a common type of map used for geomorphological investigations, land planning, and hazard and risk assessment. Landslide inventory maps covering medium to large areas are obtained primarily exploiting traditional geomorphological techniques. These techniques combine the visual and heuristic interpretation of stereoscopic aerial photographs with more or less extensive field investigations. Aerial photographs most commonly used to prepare landslide inventory maps range in scale from about 1:10,000 to about 1:40,000. Interpretation of satellite images is a relatively recent, powerful tool to obtain information of the Earth surface potentially useful for the production of landslide inventory maps. The usefulness of satellite information - and the associated technology - for the identification of landslides and the production of landslide inventory maps, remains largely unexplored. In this context, it is of interest to investigate the type, quantity, and quality of the information that can be retrieved analyzing images taken by the last generation of high and very-high resolution satellite sensors, and to compare this information with the information obtained from the analysis of traditional stereoscopic aerial photographs, or in the field. In the framework of the MORFEO project for the exploitation of Earth Observation data and technology for landslide identification and risk assessment, of the Italian Space Agency, we have compared two event-based landslide inventory maps prepared exploiting two different techniques. The two maps portray the geographical distribution and types of landslides triggered by rainfall in the period from November 2004 to May 2005 in the Collazzone area, Umbria, central Italy. The first map was prepared through reconnaissance field surveys carried out mostly along roads. The second map was obtained through the combined visual interpretation of 1:10,000 scale, colour ortho-photo maps, and images taken by the IKONOS

  12. Development of ballistics identification—from image comparison to topography measurement in surface metrology

    NASA Astrophysics Data System (ADS)

    Song, J.; Chu, W.; Vorburger, T. V.; Thompson, R.; Renegar, T. B.; Zheng, A.; Yen, J.; Silver, R.; Ols, M.

    2012-05-01

    Fired bullets and ejected cartridge cases have unique ballistics signatures left by the firearm. By analyzing the ballistics signatures, forensic examiners can trace these bullets and cartridge cases to the firearm used in a crime scene. Current automated ballistics identification systems are primarily based on image comparisons using optical microscopy. The correlation accuracy depends on image quality which is largely affected by lighting conditions. Because ballistics signatures are geometrical micro-topographies by nature, direct measurement and correlation of the surface topography is being investigated for ballistics identification. A Two-dimensional and Three-dimensional Topography Measurement and Correlation System was developed at the National Institute of Standards and Technology for certification of Standard Reference Material 2460/2461 bullets and cartridge cases. Based on this system, a prototype system for bullet signature measurement and correlation has been developed for bullet signature identifications, and has demonstrated superior correlation results.

  13. FOREWORD: Materials metrology Materials metrology

    NASA Astrophysics Data System (ADS)

    Bennett, Seton; Valdés, Joaquin

    2010-04-01

    It seems that so much of modern life is defined by the materials we use. From aircraft to architecture, from cars to communications, from microelectronics to medicine, the development of new materials and the innovative application of existing ones have underpinned the technological advances that have transformed the way we live, work and play. Recognizing the need for a sound technical basis for drafting codes of practice and specifications for advanced materials, the governments of countries of the Economic Summit (G7) and the European Commission signed a Memorandum of Understanding in 1982 to establish the Versailles Project on Advanced Materials and Standards (VAMAS). This project supports international trade by enabling scientific collaboration as a precursor to the drafting of standards. The VAMAS participants recognized the importance of agreeing a reliable, universally accepted basis for the traceability of the measurements on which standards depend for their preparation and implementation. Seeing the need to involve the wider metrology community, VAMAS approached the Comité International des Poids et Mesures (CIPM). Following discussions with NMI Directors and a workshop at the BIPM in February 2005, the CIPM decided to establish an ad hoc Working Group on the metrology applicable to the measurement of material properties. The Working Group presented its conclusions to the CIPM in October 2007 and published its final report in 2008, leading to the signature of a Memorandum of Understanding between VAMAS and the BIPM. This MoU recognizes the work that is already going on in VAMAS as well as in the Consultative Committees of the CIPM and establishes a framework for an ongoing dialogue on issues of materials metrology. The question of what is meant by traceability in the metrology of the properties of materials is particularly vexed when the measurement results depend on a specified procedure. In these cases, confidence in results requires not only traceable

  14. 64nm pitch metal1 double patterning metrology: CD and OVL control by SEMCD, image based overlay and diffraction based overlay

    NASA Astrophysics Data System (ADS)

    Ducoté, Julien; Dettoni, Florent; Bouyssou, Régis; Le-Gratiet, Bertrand; Carau, Damien; Dezauzier, Christophe

    2015-03-01

    Patterning process control of advanced nodes has required major changes over the last few years. Process control needs of critical patterning levels since 28nm technology node is extremely aggressive showing that metrology accuracy/sensitivity must be finely tuned. The introduction of pitch splitting (Litho-Etch-Litho-Etch) at 14FDSOInm node requires the development of specific metrologies to adopt advanced process control (for CD, overlay and focus corrections). The pitch splitting process leads to final line CD uniformities that are a combination of the CD uniformities of the two exposures, while the space CD uniformities are depending on both CD and OVL variability. In this paper, investigations of CD and OVL process control of 64nm minimum pitch at Metal1 level of 14FDSOI technology, within the double patterning process flow (Litho, hard mask etch, line etch) are presented. Various measurements with SEMCD tools (Hitachi), and overlay tools (KT for Image Based Overlay - IBO, and ASML for Diffraction Based Overlay - DBO) are compared. Metrology targets are embedded within a block instanced several times within the field to perform intra-field process variations characterizations. Specific SEMCD targets were designed for independent measurement of both line CD (A and B) and space CD (A to B and B to A) for each exposure within a single measurement during the DP flow. Based on those measurements correlation between overlay determined with SEMCD and with standard overlay tools can be evaluated. Such correlation at different steps through the DP flow is investigated regarding the metrology type. Process correction models are evaluated with respect to the measurement type and the intra-field sampling.

  15. Semantic Segmentation of Aerial Images in Urban Areas with Class-Specific Higher-Order Cliques

    NASA Astrophysics Data System (ADS)

    Montoya-Zegarra, J. A.; Wegner, J. D.; Ladický, L.; Schindler, K.

    2015-03-01

    In this paper we propose an approach to multi-class semantic segmentation of urban areas in high-resolution aerial images with classspecific object priors for buildings and roads. What makes model design challenging are highly heterogeneous object appearances and shapes that call for priors beyond standard smoothness or co-occurrence assumptions. The data term of our energy function consists of a pixel-wise classifier that learns local co-occurrence patterns in urban environments. To specifically model the structure of roads and buildings, we add high-level shape representations for both classes by sampling large sets of putative object candidates. Buildings are represented by sets of compact polygons, while roads are modeled as a collection of long, narrow segments. To obtain the final pixel-wise labeling, we use a CRF with higher-order potentials that balances the data term with the object candidates. We achieve overall labeling accuracies of > 80%.

  16. Integrating Spray Plane-Based Remote Sensing and Rapid Image Processing with Variable-Rate Aerial Application.

    Technology Transfer Automated Retrieval System (TEKTRAN)

    A remote sensing and variable rate application system was configured for agricultural aircraft. This combination system has the potential of providing a completely integrated solution for all aspects of aerial site-specific application and includes remote sensing, image processing and georegistratio...

  17. Building roof segmentation from aerial images using a lineand region-based watershed segmentation technique.

    PubMed

    El Merabet, Youssef; Meurie, Cyril; Ruichek, Yassine; Sbihi, Abderrahmane; Touahni, Raja

    2015-01-01

    In this paper, we present a novel strategy for roof segmentation from aerial images (orthophotoplans) based on the cooperation of edge- and region-based segmentation methods. The proposed strategy is composed of three major steps. The first one, called the pre-processing step, consists of simplifying the acquired image with an appropriate couple of invariant and gradient, optimized for the application, in order to limit illumination changes (shadows, brightness, etc.) affecting the images. The second step is composed of two main parallel treatments: on the one hand, the simplified image is segmented by watershed regions. Even if the first segmentation of this step provides good results in general, the image is often over-segmented. To alleviate this problem, an efficient region merging strategy adapted to the orthophotoplan particularities, with a 2D modeling of roof ridges technique, is applied. On the other hand, the simplified image is segmented by watershed lines. The third step consists of integrating both watershed segmentation strategies into a single cooperative segmentation scheme in order to achieve satisfactory segmentation results. Tests have been performed on orthophotoplans containing 100 roofs with varying complexity, and the results are evaluated with the VINETcriterion using ground-truth image segmentation. A comparison with five popular segmentation techniques of the literature demonstrates the effectiveness and the reliability of the proposed approach. Indeed, we obtain a good segmentation rate of 96% with the proposed method compared to 87.5% with statistical region merging (SRM), 84% with mean shift, 82% with color structure code (CSC), 80% with efficient graph-based segmentation algorithm (EGBIS) and 71% with JSEG. PMID:25648706

  18. An asymmetric re-weighting method for the precision combined bundle adjustment of aerial oblique images

    NASA Astrophysics Data System (ADS)

    Xie, Linfu; Hu, Han; Wang, Jingxue; Zhu, Qing; Chen, Min

    2016-07-01

    Combined bundle adjustment is a fundamental step in the processing of massive oblique images. Traditional bundle adjustment designed for nadir images gives identical weights to different parts of image point observations made from different directions, due to the assumption that the errors in the observations follow the same Gaussian distribution. However, because of their large tilt angles, aerial oblique images have trapezoidal footprints on the ground, and their areas correspond to conspicuously different ground sample distances. The errors in different observations no longer conform to the above assumption, which leads to suboptimal bundle adjustment accuracy and restricts subsequent 3D applications. To model the distribution of the errors correctly for the combined bundle adjustment of oblique images, this paper proposes an asymmetric re-weighting method. The scale of each pixel is used to determine a re-weighting factor, and each pixel is subsequently projected onto the ground to identify another anisotropic re-weighting factor using the shape of its quadrangle. Next, these two factors are integrated into the combined bundle adjustment using asymmetric weights for the image point observations; greater weights are assigned to observations with fine resolutions, and those with coarse resolutions are penalized. This paper analyzes urban and rural images captured by three different five-angle camera systems, from both proprietary datasets and the ISPRS/EuroSDR benchmark. The results reveal that the proposed method outperforms the traditional method in both back-projected and triangulated precision by approximately 5-10% in most cases. Furthermore, the misalignments of point clouds generated by the different cameras are significantly alleviated after combined bundle adjustment.

  19. Extracting roads based on Retinex and improved Canny operator with shape criteria in vague and unevenly illuminated aerial images

    NASA Astrophysics Data System (ADS)

    Ronggui, Ma; Weixing, Wang; Sheng, Liu

    2012-01-01

    An automatic road extraction method for vague aerial images is proposed in this paper. First, a high-resolution but low-contrast image is enhanced by using a Retinex-based algorithm. Then, the enhanced image is segmented with an improved Canny edge detection operator that can automatically threshold the image into a binary edge image. Subsequently, the linear and curved road segments are regulated by the Hough line transform and extracted based on several thresholds of road size and shapes, in which a number of morphological operators are used such as thinning (skeleton), junction detection, and endpoint detection. In experiments, a number of vague aerial images with bad uniformity are selected for testing. Similarity and discontinuation-based algorithms, such as Otsu thresholding, merge and split, edge detection-based algorithms, and the graph-based algorithm are compared with the new method. The experiment and comparison results show that the studied method can enhance vague, low-contrast, and unevenly illuminated color aerial road images; it can detect most road edges with fewer disturb elements and trace roads with good quality. The method in this study is promising.

  20. An Aerial-Image Dense Matching Approach Based on Optical Flow Field

    NASA Astrophysics Data System (ADS)

    Yuan, Wei; Chen, Shiyu; Zhang, Yong; Gong, Jianya; Shibasaki, Ryosuke

    2016-06-01

    Dense matching plays an important role in many fields, such as DEM (digital evaluation model) producing, robot navigation and 3D environment reconstruction. Traditional approaches may meet the demand of accuracy. But the calculation time and out puts density is hardly be accepted. Focus on the matching efficiency and complex terrain surface matching feasibility an aerial image dense matching method based on optical flow field is proposed in this paper. First, some high accurate and uniformed control points are extracted by using the feature based matching method. Then the optical flow is calculated by using these control points, so as to determine the similar region between two images. Second, the optical flow field is interpolated by using the multi-level B-spline interpolation in the similar region and accomplished the pixel by pixel coarse matching. Final, the results related to the coarse matching refinement based on the combined constraint, which recognizes the same points between images. The experimental results have shown that our method can achieve per-pixel dense matching points, the matching accuracy achieves sub-pixel level, and fully meet the three-dimensional reconstruction and automatic generation of DSM-intensive matching's requirements. The comparison experiments demonstrated that our approach's matching efficiency is higher than semi-global matching (SGM) and Patch-based multi-view stereo matching (PMVS) which verifies the feasibility and effectiveness of the algorithm.

  1. Stereoscopic Imaging for Obstacle Detection Onboard Low-Flying Unmanned Aerial Vehicles

    NASA Astrophysics Data System (ADS)

    Hanna, Emad

    Obstacle detection for low-flying unmanned aerial vehicles (UAVs) poses unique engineering challenges in terms of real-time implementation as well as system accuracy. Of all the available techniques for carrying out this task, optical sensors stand out as an inexpensive, lightweight and reliable solution. Image processing methods are used to analyze the images captured by the UAV camera(s) and to generate information pertaining to the location and motion of the obstacles in the field of view. These methods, however, can be computationally intensive and must be optimized if they are to be implemented in a moving vehicle. Additionally, the measurement of distance usually requires a high level of calibration before the results are useful. This thesis proposes a calibration method rooted in image data analysis and shows how this can be used to accurately predict the distance to obstacles. An algorithm tailored specifically to low-flying UAVs (Sparse Edge Reconstruction) is presented. Both the calibration method and the algorithm were used to analyze video gathered on a low-altitude test flight.

  2. Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging

    PubMed Central

    Korytár, D.; Vagovič, P.; Végsö, K.; Šiffalovič, P.; Dobročka, E.; Jark, W.; Áč, V.; Zápražný, Z.; Ferrari, C.; Cecilia, A.; Hamann, E.; Mikulík, P.; Baumbach, T.; Fiederle, M.; Jergel, M.

    2013-01-01

    While channel-cut crystals, in which the diffracting surfaces in an asymmetric cut are kept parallel, can provide beam collimation and spectral beam shaping, they can in addition provide beam compression or expansion if the cut is V-shaped. The compression/expansion ratio depends in this case on the total asymmetry factor. If the Ge(220) diffraction planes and a total asymmetry factor in excess of 10 are used, the rocking curves of two diffractors will have a sufficient overlap only if the second diffractor is tuned slightly with respect to the first one. This study compares and analyses several ways of overcoming this mismatch, which is due to refraction, when the Cu Kα1 beam is compressed 21-fold in a V21 monochromator. A more than sixfold intensity increase was obtained if the matching was improved either by a compositional variation or by a thermal deformation. This provided an intensity gain compared with the use of a simple slit in a symmetrical channel-cut monochromator. The first attempt to overcome the mismatch by introducing different types of X-ray prisms for the required beam deflection is described as well. The performance of the V-shaped monochromators is demonstrated in two applications. A narrow collimated monochromatic beam obtained in the beam compressing mode was used for high-resolution grazing-incidence small-angle X-ray scattering measurements of a silicon sample with corrupted surface. In addition, a two-dimensional Bragg magnifier, based on two crossed V15 channel monochromators in beam expansion mode and tuned by means of unequal asymmetries, was successfully applied to high-resolution imaging of test structures in combination with a Medipix detector. PMID:24046503

  3. Advanced Tie Feature Matching for the Registration of Mobile Mapping Imaging Data and Aerial Imagery

    NASA Astrophysics Data System (ADS)

    Jende, P.; Peter, M.; Gerke, M.; Vosselman, G.

    2016-06-01

    Mobile Mapping's ability to acquire high-resolution ground data is opposing unreliable localisation capabilities of satellite-based positioning systems in urban areas. Buildings shape canyons impeding a direct line-of-sight to navigation satellites resulting in a deficiency to accurately estimate the mobile platform's position. Consequently, acquired data products' positioning quality is considerably diminished. This issue has been widely addressed in the literature and research projects. However, a consistent compliance of sub-decimetre accuracy as well as a correction of errors in height remain unsolved. We propose a novel approach to enhance Mobile Mapping (MM) image orientation based on the utilisation of highly accurate orientation parameters derived from aerial imagery. In addition to that, the diminished exterior orientation parameters of the MM platform will be utilised as they enable the application of accurate matching techniques needed to derive reliable tie information. This tie information will then be used within an adjustment solution to correct affected MM data. This paper presents an advanced feature matching procedure as a prerequisite to the aforementioned orientation update. MM data is ortho-projected to gain a higher resemblance to aerial nadir data simplifying the images' geometry for matching. By utilising MM exterior orientation parameters, search windows may be used in conjunction with a selective keypoint detection and template matching. Originating from different sensor systems, however, difficulties arise with respect to changes in illumination, radiometry and a different original perspective. To respond to these challenges for feature detection, the procedure relies on detecting keypoints in only one image. Initial tests indicate a considerable improvement in comparison to classic detector/descriptor approaches in this particular matching scenario. This method leads to a significant reduction of outliers due to the limited availability

  4. Mapping temporal changes in connectivity using high-resolution aerial data and object based image analysis

    NASA Astrophysics Data System (ADS)

    Masselink, Rens; Anders, Niels; Keesstra, Saskia; Seeger, Manuel

    2014-05-01

    Within the field of geomorphology mapping has always been an important tool to interpret spatial and temporal distributions of phenomena and processes at the surface. In the field of connectivity however, although throughout the past decade many articles have been published, there are only very few that go into the mapping of connectivity. This study aimed at developing a new, automated method for mapping connectivity within agricultural catchments. The method, which is a combination of Object-Based Image Analysis (OBIA) and traditional geomorphological field mapping, was applied to two agricultural catchments in Navarre, Spain, both with an area of approximately 2 sq.km. An unmanned aerial vehicle (UAV) was used to take aerial photographs with a resolution of 6 cm, of which a DEM with a 12 cm resolution was created using structure-from-motion photogrammetry. Connectivity was mapped within the study areas using OBIA using a top down method, meaning that connectivity was mapped at different scale levels, starting at the largest scale. Firstly sub-catchments were automatically delineated, after which several characteristics and features that affect connectivity within the sub-catchments were classified, e.g. landuse, landslides, rills, gullies, riparian vegetation, changes in slope, ploughing direction etc. In two consecutive years (2013-2014) photographs were taken and connectivity of both catchments of both years will be compared. Future work will include a quantification of the mapped connectivity (highly connected years vs. low connected years), causes and consequences of these differences in connectivity, comparison to existing connectivity indices and comparison of mapped connectivity in sub-catchments and measured discharge.

  5. Nanoelectronics: Metrology and Computation

    SciTech Connect

    Lundstrom, Mark; Clark, Jason V.; Klimeck, Gerhard; Raman, Arvind

    2007-09-26

    Research in nanoelectronics poses new challenges for metrology, but advances in theory, simulation and computing and networking technology provide new opportunities to couple simulation and metrology. This paper begins with a brief overview of current work in computational nanoelectronics. Three examples of how computation can assist metrology will then be discussed. The paper concludes with a discussion of how cyberinfrastructure can help connect computing and metrology using the nanoHUB (www.nanoHUB.org) as a specific example.

  6. Mass image data storage system for high resolution aerial photographic survey

    NASA Astrophysics Data System (ADS)

    Zen, Luan; Tan, Jiubin; Zhao, Zhongwen

    2008-10-01

    In order to make it possible for an image data acquisition and storage system used for aerial photographic survey to have a continuous storage speed of 144 MB/s and data storage capacity of 260GB, three main problems have been solved in this paper. First, with multi-channel synchronous DMA transfer, parallel data storage of four SCSI hard disks is realized. It solved the problem of the data transfer rate too high for direct storage. Then, to increase the data transfer rate, a high speed BUS based on LVDS and a SCSI control circuit based on FAS368M were designed. It solved the problem of PCI BUS limiting the storage speed. Finally, the problem of the SCSI hard disk continuous storage speed declining led by much time interval between two DMA transfers is solved by optimizing DMA channel. The practical system test shows that the acquisition and storage system has a continuous storage speed of 150 MB/s and a data storage capacity of 280GB. Therefore, it is a new storage method for high speed and mass image data.

  7. The Need of Nested Grids for Aerial and Satellite Images and Digital Elevation Models

    NASA Astrophysics Data System (ADS)

    Villa, G.; Mas, S.; Fernández-Villarino, X.; Martínez-Luceño, J.; Ojeda, J. C.; Pérez-Martín, B.; Tejeiro, J. A.; García-González, C.; López-Romero, E.; Soteres, C.

    2016-06-01

    Usual workflows for production, archiving, dissemination and use of Earth observation images (both aerial and from remote sensing satellites) pose big interoperability problems, as for example: non-alignment of pixels at the different levels of the pyramids that makes it impossible to overlay, compare and mosaic different orthoimages, without resampling them and the need to apply multiple resamplings and compression-decompression cycles. These problems cause great inefficiencies in production, dissemination through web services and processing in "Big Data" environments. Most of them can be avoided, or at least greatly reduced, with the use of a common "nested grid" for mutiresolution production, archiving, dissemination and exploitation of orthoimagery, digital elevation models and other raster data. "Nested grids" are space allocation schemas that organize image footprints, pixel sizes and pixel positions at all pyramid levels, in order to achieve coherent and consistent multiresolution coverage of a whole working area. A "nested grid" must be complemented by an appropriate "tiling schema", ideally based on the "quad-tree" concept. In the last years a "de facto standard" grid and Tiling Schema has emerged and has been adopted by virtually all major geospatial data providers. It has also been adopted by OGC in its "WMTS Simple Profile" standard. In this paper we explain how the adequate use of this tiling schema as common nested grid for orthoimagery, DEMs and other types of raster data constitutes the most practical solution to most of the interoperability problems of these types of data.

  8. Miniaturization of sub-meter resolution hyperspectral imagers on unmanned aerial systems

    NASA Astrophysics Data System (ADS)

    Hill, Samuel L.; Clemens, Peter

    2014-05-01

    Traditional airborne environmental monitoring has frequently deployed hyperspectral imaging as a leading tool for characterizing and analyzing a scene's critical spectrum-based signatures for applications in agriculture genomics and crop health, vegetation and mineral monitoring, and hazardous material detection. As the acceptance of hyperspectral evaluation grows in the airborne community, there has been a dramatic trend in moving the technology from use on midsize aircraft to Unmanned Aerial Systems (UAS). The use of UAS accomplishes a number of goals including the reduction in cost to run multiple seasonal evaluations over smaller but highly valuable land-areas, the ability to use frequent data collections to make rapid decisions on land management, and the improvement of spatial resolution by flying at lower altitudes (< 150 m). Despite this trend, there are several key parameters affecting the use of traditional hyperspectral instruments in UAS with payloads less than 0.5 kg (~1lb) where size, weight and power (SWaP) are critical to how high and how far a given UAS can fly. Additionally, on many of the light-weight UAS, users are frequently trying to capture data from one or more instruments to augment the hyperspectral data collection, thus reducing the amount of SWaP available to the hyperspectral instrumentation. The following manuscript will provide an analysis on a newly-developed miniaturized hyperspectral imaging platform that provides full hyperspectral resolution and traditional hyperspectral capabilities without sacrificing performance to accommodate the decreasing SWaP of smaller and smaller UAS platforms.

  9. CSAM Metrology Software Tool

    NASA Technical Reports Server (NTRS)

    Vu, Duc; Sandor, Michael; Agarwal, Shri

    2005-01-01

    CSAM Metrology Software Tool (CMeST) is a computer program for analysis of false-color CSAM images of plastic-encapsulated microcircuits. (CSAM signifies C-mode scanning acoustic microscopy.) The colors in the images indicate areas of delamination within the plastic packages. Heretofore, the images have been interpreted by human examiners. Hence, interpretations have not been entirely consistent and objective. CMeST processes the color information in image-data files to detect areas of delamination without incurring inconsistencies of subjective judgement. CMeST can be used to create a database of baseline images of packages acquired at given times for comparison with images of the same packages acquired at later times. Any area within an image can be selected for analysis, which can include examination of different delamination types by location. CMeST can also be used to perform statistical analyses of image data. Results of analyses are available in a spreadsheet format for further processing. The results can be exported to any data-base-processing software.

  10. Toward full-chip prediction of yield-limiting contact patterning failure: correlation of simulated image parameters to advanced contact metrology metrics

    NASA Astrophysics Data System (ADS)

    Sturtevant, John L.; Chou, Dyiann

    2006-03-01

    to manufacturing. This paper will focus on 130 nm node contact patterning, and will correlate SEM Profile Grade output to the extensive suite of model-based image tags from the Calibre TM opc-verification engine. With an understanding of which image parameters are most highly correlated to the occurrence of incomplete contact formation for a given process, the process model can be used to automatically direct inspection metrology to those layout instances that pose the highest risk of patterning failure through the lithographic process window. Such an approach maximizes the value content of in-line metrology.

  11. Low-Level Tie Feature Extraction of Mobile Mapping Data (mls/images) and Aerial Imagery

    NASA Astrophysics Data System (ADS)

    Jende, P.; Hussnain, Z.; Peter, M.; Oude Elberink, S.; Gerke, M.; Vosselman, G.

    2016-03-01

    Mobile Mapping (MM) is a technique to obtain geo-information using sensors mounted on a mobile platform or vehicle. The mobile platform's position is provided by the integration of Global Navigation Satellite Systems (GNSS) and Inertial Navigation Systems (INS). However, especially in urban areas, building structures can obstruct a direct line-of-sight between the GNSS receiver and navigation satellites resulting in an erroneous position estimation. Therefore, derived MM data products, such as laser point clouds or images, lack the expected positioning reliability and accuracy. This issue has been addressed by many researchers, whose aim to mitigate these effects mainly concentrates on utilising tertiary reference data. However, current approaches do not consider errors in height, cannot achieve sub-decimetre accuracy and are often not designed to work in a fully automatic fashion. We propose an automatic pipeline to rectify MM data products by employing high resolution aerial nadir and oblique imagery as horizontal and vertical reference, respectively. By exploiting the MM platform's defective, and therefore imprecise but approximate orientation parameters, accurate feature matching techniques can be realised as a pre-processing step to minimise the MM platform's three-dimensional positioning error. Subsequently, identified correspondences serve as constraints for an orientation update, which is conducted by an estimation or adjustment technique. Since not all MM systems employ laser scanners and imaging sensors simultaneously, and each system and data demands different approaches, two independent workflows are developed in parallel. Still under development, both workflows will be presented and preliminary results will be shown. The workflows comprise of three steps; feature extraction, feature matching and the orientation update. In this paper, initial results of low-level image and point cloud feature extraction methods will be discussed as well as an outline of

  12. Three-dimensional imaging applications in Earth Sciences using video data acquired from an unmanned aerial vehicle

    NASA Astrophysics Data System (ADS)

    McLeod, Tara

    For three dimensional (3D) aerial images, unmanned aerial vehicles (UAVs) are cheaper to operate and easier to fly than the typical manned craft mounted with a laser scanner. This project explores the feasibility of using 2D video images acquired with a UAV and transforming them into 3D point clouds. The Aeryon Scout -- a quad-copter micro UAV -- flew two missions: the first at York University Keele campus and the second at the Canadian Wollastonite Mine Property. Neptec's ViDAR software was used to extract 3D information from the 2D video using structure from motion. The resulting point clouds were sparsely populated, yet captured vegetation well. They were used successfully to measure fracture orientation in rock walls. Any improvement in the video resolution would cascade through the processing and improve the overall results.

  13. EDITORIAL: Nanoscale metrology Nanoscale metrology

    NASA Astrophysics Data System (ADS)

    Picotto, G. B.; Koenders, L.; Wilkening, G.

    2009-08-01

    characterization. The papers in the first part report on new or improved instrumentation, details of developments of metrology SFM, improvements to SFM, probes and scanning methods in the direction of nanoscale coordinate measuring machines and true 3D measurements as well as of progress of a 2D encoder based on a regular crystalline lattice. To ensure traceability to the SI unit of length many highly sophisticated instruments are equipped with laser interferometers to measure small displacements in the nanometre range very accurately. Improving these techniques is still a challenge and therefore new interferometric techniques are considered in several papers as well as improved sensors for nanodisplacement measurements or the development of a deep UV microscope for micro- and nanostructures. The tactile measurement of small structures also calls for a better control of forces in the nano- and piconewton range. A nanoforce facility, based on a disk-pendulum with electrostatic stiffness reduction and electrostatic force compensation, is presented for the measurement of small forces. In the second part the contributions are related to calibration and correction strategies and standards such as the development of test objects based on 3D silicon structures, and of samples with irregular surface profiles, and their use for calibration. The shape of the tip and its influence on measurements is still a contentious issue and addressed in several papers: use of nanospheres for tip characterization, a geometrical approach for reconstruction errors by tactile probing. Molecular dynamical calculations, classical as well as ab initio (based on density functional theory), are used to discuss effects of tip-sample relaxation on the topography and to have a better base from which to estimate uncertainties in measurements of small particles or features. Some papers report about measurements of air refractivity fluctuations by phase modulation interferometry, angle-scale traceability by laser

  14. A supervised method for object-based 3D building change detection on aerial stereo images

    NASA Astrophysics Data System (ADS)

    Qin, R.; Gruen, A.

    2014-08-01

    There is a great demand for studying the changes of buildings over time. The current trend for building change detection combines the orthophoto and DSM (Digital Surface Models). The pixel-based change detection methods are very sensitive to the quality of the images and DSMs, while the object-based methods are more robust towards these problems. In this paper, we propose a supervised method for building change detection. After a segment-based SVM (Support Vector Machine) classification with features extracted from the orthophoto and DSM, we focus on the detection of the building changes of different periods by measuring their height and texture differences, as well as their shapes. A decision tree analysis is used to assess the probability of change for each building segment and the traffic lighting system is used to indicate the status "change", "non-change" and "uncertain change" for building segments. The proposed method is applied to scanned aerial photos of the city of Zurich in 2002 and 2007, and the results have demonstrated that our method is able to achieve high detection accuracy.

  15. Miniaturization of high spectral spatial resolution hyperspectral imagers on unmanned aerial systems

    NASA Astrophysics Data System (ADS)

    Hill, Samuel L.; Clemens, Peter

    2015-06-01

    Traditional airborne environmental monitoring has frequently deployed hyperspectral imaging as a leading tool for characterizing and analyzing a scene's critical spectrum-based signatures for applications in agriculture genomics and crop health, vegetation and mineral monitoring, and hazardous material detection. As the acceptance of hyperspectral evaluation grows in the airborne community, there has been a dramatic trend in moving the technology from use on midsize aircraft to Unmanned Aerial Systems (UAS). The use of UAS accomplishes a number of goals including the reduction in cost to run multiple seasonal evaluations over smaller but highly valuable land-areas, the ability to use frequent data collections to make rapid decisions on land management, and the improvement of spatial resolution by flying at lower altitudes (<500 ft.). Despite this trend, there are several key parameters affecting the use of traditional hyperspectral instruments in UAS with payloads less than 10 lbs. where size, weight and power (SWAP) are critical to how high and how far a given UAS can fly. Additionally, on many of the light-weight UAS, users are frequently trying to capture data from one or more instruments to augment the hyperspectral data collection, thus reducing the amount of SWAP available to the hyperspectral instrumentation. The following manuscript will provide an analysis on a newly-developed miniaturized hyperspectral imaging platform, the Nano-Hyperspec®, which provides full hyperspectral resolution and traditional hyperspectral capabilities without sacrificing performance to accommodate the decreasing SWAP of smaller and smaller UAS platforms. The analysis will examine the Nano-Hyperspec flown in several UAS airborne environments and the correlation of the systems data with LiDAR and other GIS datasets.

  16. Registration of Laser Scanning Point Clouds and Aerial Images Using either Artificial or Natural Tie Features

    NASA Astrophysics Data System (ADS)

    Rönnholm, P.; Haggrén, H.

    2012-07-01

    Integration of laser scanning data and photographs is an excellent combination regarding both redundancy and complementary. Applications of integration vary from sensor and data calibration to advanced classification and scene understanding. In this research, only airborne laser scanning and aerial images are considered. Currently, the initial registration is solved using direct orientation sensors GPS and inertial measurements. However, the accuracy is not usually sufficient for reliable integration of data sets, and thus the initial registration needs to be improved. A registration of data from different sources requires searching and measuring of accurate tie features. Usually, points, lines or planes are preferred as tie features. Therefore, the majority of resent methods rely highly on artificial objects, such as buildings, targets or road paintings. However, in many areas no such objects are available. For example in forestry areas, it would be advantageous to be able to improve registration between laser data and images without making additional ground measurements. Therefore, there is a need to solve registration using only natural features, such as vegetation and ground surfaces. Using vegetation as tie features is challenging, because the shape and even location of vegetation can change because of wind, for example. The aim of this article was to compare registration accuracies derived by using either artificial or natural tie features. The test area included urban objects as well as trees and other vegetation. In this area, two registrations were performed, firstly, using mainly built objects and, secondly, using only vegetation and ground surface. The registrations were solved applying the interactive orientation method. As a result, using artificial tie features leaded to a successful registration in all directions of the coordinate system axes. In the case of using natural tie features, however, the detection of correct heights was difficult causing

  17. Low-Altitude Coastal Aerial Photogrammetry for High-Resolution Seabed Imaging and Habitat Mapping of Shallow Areas

    NASA Astrophysics Data System (ADS)

    Alevizos, E.

    2012-04-01

    This paper explores the application of Kite Aerial Photography at the coastal environment along with digital photogrammetry for seabed geomorphological mapping. This method takes advantage of sea-water clearance that allows the transmission of sunlight through the water column and backscatter of seabed reflection under certain conditions of sunlight, weather and sea state. We analyze the procedure of acquisition, processing and interpretation of kite aerial imagery from the sub-littoral zone up to 5 meters depth. Using a calibrated non-metric digital compact camera we managed to acquire several vertical aerial images from two coastal sites in the Attica Peninsula (Greece) covering an area of approximately 200x100 meters. Both sites express significant geomorphological variability and they have a relatively smooth slope profile. For the photogrammetric processing we acquired topographic and bathymetric survey simultaneously with Kite Aerial Photography using a portable GPS of sub-meter accuracy. In order to deal with bottom control measurements we developed Bottom Control Points which were placed on the seabed. These act like the Ground Control Points and they can be easily deployed in the marine environment. The processing included interior and exterior orientation as well as ortho-rectification of images. This produced final orthomosaics for each site at scales 1:500 - 1:1500 with a resolution of a few centimeters. Interpretation of the seabed was based on color and texture features of certain areas with explicit seabed reflectivity and was supported by underwater photographs for ground truthing. At the final stage of image analysis, we recognized the boundaries (contrasting reflectivity) between different bottom types and digitized them as 2D objects using GIS. Concluding, this project emphasizes on the advantages and physical restrictions of Kite Aerial Photography in mapping small-scale geomorphological features in coastal, estuarine and lagoonal environments

  18. Learning Scene Categories from High Resolution Satellite Image for Aerial Video Analysis

    SciTech Connect

    Cheriyadat, Anil M

    2011-01-01

    Automatic scene categorization can benefit various aerial video processing applications. This paper addresses the problem of predicting the scene category from aerial video frames using a prior model learned from satellite imagery. We show that local and global features in the form of line statistics and 2-D power spectrum parameters respectively can characterize the aerial scene well. The line feature statistics and spatial frequency parameters are useful cues to distinguish between different urban scene categories. We learn the scene prediction model from highresolution satellite imagery to test the model on the Columbus Surrogate Unmanned Aerial Vehicle (CSUAV) dataset ollected by high-altitude wide area UAV sensor platform. e compare the proposed features with the popular Scale nvariant Feature Transform (SIFT) features. Our experimental results show that proposed approach outperforms te SIFT model when the training and testing are conducted n disparate data sources.

  19. Aerial Images from AN Uav System: 3d Modeling and Tree Species Classification in a Park Area

    NASA Astrophysics Data System (ADS)

    Gini, R.; Passoni, D.; Pinto, L.; Sona, G.

    2012-07-01

    The use of aerial imagery acquired by Unmanned Aerial Vehicles (UAVs) is scheduled within the FoGLIE project (Fruition of Goods Landscape in Interactive Environment): it starts from the need to enhance the natural, artistic and cultural heritage, to produce a better usability of it by employing audiovisual movable systems of 3D reconstruction and to improve monitoring procedures, by using new media for integrating the fruition phase with the preservation ones. The pilot project focus on a test area, Parco Adda Nord, which encloses various goods' types (small buildings, agricultural fields and different tree species and bushes). Multispectral high resolution images were taken by two digital compact cameras: a Pentax Optio A40 for RGB photos and a Sigma DP1 modified to acquire the NIR band. Then, some tests were performed in order to analyze the UAV images' quality with both photogrammetric and photo-interpretation purposes, to validate the vector-sensor system, the image block geometry and to study the feasibility of tree species classification. Many pre-signalized Control Points were surveyed through GPS to allow accuracy analysis. Aerial Triangulations (ATs) were carried out with photogrammetric commercial software, Leica Photogrammetry Suite (LPS) and PhotoModeler, with manual or automatic selection of Tie Points, to pick out pros and cons of each package in managing non conventional aerial imagery as well as the differences in the modeling approach. Further analysis were done on the differences between the EO parameters and the corresponding data coming from the on board UAV navigation system.

  20. Satellite Images and Aerial Photographs of the Effects of Hurricanes Katrina and Rita on Coastal Louisiana

    USGS Publications Warehouse

    Barras, John A.

    2007-01-01

    -water datasets derived from the Landsat TM satellite imagery were combined with 2001 marsh vegetative communities (Chabreck and others, unpub. data, 2001) to identify land-water configurations by marsh community before and after the hurricanes. Links to the Landsat TM images and aerial photographs are given below (figs. 1-29). Comparison of land area before the storms to land area after the storms is made possible by the inclusion of Landsat TM images and aerial photographs taken in the years and months before the storms. The figures are arranged geographically from east to west to follow the chronology of the effects of the storms. For a more detailed analysis of the changes wrought by these storms, see 'Land Area Changes in Coastal Louisiana After Hurricanes Katrina and Rita' (Barras, in press).

  1. Semi-Automated Classification of Gray Scale Aerial Photographs using Geographic Object Based Image Analysis (GEOBIA) Technique

    NASA Astrophysics Data System (ADS)

    Harb Rabia, Ahmed; Terribile, Fabio

    2013-04-01

    Aerial photography is an important source of high resolution remotely sensed data. Before 1970, aerial photographs were the only remote sensing data source for land use and land cover classification. Using these old aerial photographs improve the final output of land use and land cover change detection. However, classic techniques of aerial photographs classification like manual interpretation or screen digitization require great experience, long processing time and vast effort. A new technique needs to be developed in order to reduce processing time and effort and to give better results. Geographic object based image analysis (GEOBIA) is a newly developed area of Geographic Information Science and remote sensing in which automatic segmentation of images into objects of similar spectral, temporal and spatial characteristics is undertaken. Unlike pixel-based technique, GEOBIA deals with the object properties such as texture, square fit, roundness and many other properties that can improve classification results. GEOBIA technique can be divided into two main steps; segmentation and classification. Segmentation process is grouping adjacent pixels into objects of similar spectral and spatial characteristics. Classification process is assigning classes to the generated objects based on the characteristics of the individual objects. This study aimed to use GEOBIA technique to develop a novel approach for land use and land cover classification of aerial photographs that saves time and effort and gives improved results. Aerial photographs from 1954 of Valle Telesina in Italy were used in this study. Images were rectified and georeferenced in Arcmap using topographic maps. Images were then processed in eCognition software to generate land use and land cover map of 1954. A decision tree rule set was developed in eCognition to classify images and finally nine classes of general land use and land cover in the study area were recognized (forest, trees stripes, agricultural

  2. Digital Camera Calibration Using Images Taken from AN Unmanned Aerial Vehicle

    NASA Astrophysics Data System (ADS)

    Pérez, M.; Agüera, F.; Carvajal, F.

    2011-09-01

    For calibrating the camera, an accurate determination of the interior orientation parameters is needed. For more accurate results, the calibration images should be taken under conditions that are similar to the field samples. The aim of this work is the establishment of an efficient and accurate digital camera calibration method to be used in particular working conditions, as it can be found with our UAV (Unmanned Aerial Vehicle) photogrammetric projects. The UAV used in this work was md4-200 modelled by Microdrones. The microdrone is also equipped with a standard digital non- metric camera, the Pentax Optio A40 camera. To find out the interior orientation parameters of the digital camera, two calibration methods were done. A lab calibration based on a flat pattern and a field calibration were fulfilled. To carry out the calibration, Photomodeler Scanner software was used in both cases. The lab calibration process was completely automatic using a calibration grid. The focal length was fixed at widest angle and the network included a total of twelve images with± 90º roll angles. In order to develop the field calibration, a flight plan was programmed including a total of twelve images. In the same way as in the lab calibration, the focal length was fixed at widest angle. The field test used in the study was a flat surface located on the University of Almería campus and a set of 67 target points were placed. The calibration field area was 25 × 25 m approximately and the altitude flight over ground was 50 m. After the software processing, the camera calibration parameter values were obtained. The paper presents the process, the results and the accuracy of these calibration methods. The field calibration method reduced the final total error obtained in the previous lab calibration. Furthermore the overall RMSs obtained from both methods are similar. Therefore we will apply the field calibration results to all our photogrammetric projects in which the flight high

  3. Application of high resolution images from unmanned aerial vehicles for hydrology and rangeland science

    NASA Astrophysics Data System (ADS)

    Rango, A.; Vivoni, E. R.; Anderson, C. A.; Perini, N. A.; Saripalli, S.; Laliberte, A.

    2012-12-01

    A common problem in many natural resource disciplines is the lack of high-enough spatial resolution images that can be used for monitoring and modeling purposes. Advances have been made in the utilization of Unmanned Aerial Vehicles (UAVs) in hydrology and rangeland science. By utilizing low flight altitudes and velocities, UAVs are able to produce high resolution (5 cm) images as well as stereo coverage (with 75% forward overlap and 40% sidelap) to extract digital elevation models (DEM). Another advantage of flying at low altitude is that the potential problems of atmospheric haze obscuration are eliminated. Both small fixed-wing and rotary-wing aircraft have been used in our experiments over two rangeland areas in the Jornada Experimental Range in southern New Mexico and the Santa Rita Experimental Range in southern Arizona. The fixed-wing UAV has a digital camera in the wing and six-band multispectral camera in the nose, while the rotary-wing UAV carries a digital camera as payload. Because we have been acquiring imagery for several years, there are now > 31,000 photos at one of the study sites, and 177 mosaics over rangeland areas have been constructed. Using the DEM obtained from the imagery we have determined the actual catchment areas of three watersheds and compared these to previous estimates. At one site, the UAV-derived watershed area is 4.67 ha which is 22% smaller compared to a manual survey using a GPS unit obtained several years ago. This difference can be significant in constructing a watershed model of the site. From a vegetation species classification, we also determined that two of the shrub types in this small watershed(mesquite and creosote with 6.47 % and 5.82% cover, respectively) grow in similar locations(flat upland areas with deep soils), whereas the most predominant shrub(mariola with 11.9% cover) inhabits hillslopes near stream channels(with steep shallow soils). The positioning of these individual shrubs throughout the catchment using

  4. Estimating Mixed Broadleaves Forest Stand Volume Using Dsm Extracted from Digital Aerial Images

    NASA Astrophysics Data System (ADS)

    Sohrabi, H.

    2012-07-01

    In mixed old growth broadleaves of Hyrcanian forests, it is difficult to estimate stand volume at plot level by remotely sensed data while LiDar data is absent. In this paper, a new approach has been proposed and tested for estimating stand forest volume. The approach is based on this idea that forest volume can be estimated by variation of trees height at plots. In the other word, the more the height variation in plot, the more the stand volume would be expected. For testing this idea, 120 circular 0.1 ha sample plots with systematic random design has been collected in Tonekaon forest located in Hyrcanian zone. Digital surface model (DSM) measure the height values of the first surface on the ground including terrain features, trees, building etc, which provides a topographic model of the earth's surface. The DSMs have been extracted automatically from aerial UltraCamD images so that ground pixel size for extracted DSM varied from 1 to 10 m size by 1m span. DSMs were checked manually for probable errors. Corresponded to ground samples, standard deviation and range of DSM pixels have been calculated. For modeling, non-linear regression method was used. The results showed that standard deviation of plot pixels with 5 m resolution was the most appropriate data for modeling. Relative bias and RMSE of estimation was 5.8 and 49.8 percent, respectively. Comparing to other approaches for estimating stand volume based on passive remote sensing data in mixed broadleaves forests, these results are more encouraging. One big problem in this method occurs when trees canopy cover is totally closed. In this situation, the standard deviation of height is low while stand volume is high. In future studies, applying forest stratification could be studied.

  5. Apollo Metrology Program

    NASA Technical Reports Server (NTRS)

    Porter, W. A.; Ransom, D. G.; Gardner, H. H.

    1966-01-01

    This paper introduces the metrology requirements in the recently published Apollo Program handbook, NHB 5400.2, entitled, 'Apollo Metrology Requirements Manual.' The major elements and control practices required for a comprehensive metrology system are identified. The elements are presented to you with sufficient detail of control practices to provide the scope of a total metrology program. The Manual is for implementation by the Apollo Space Flight Centers, their testing sites and contractors. The benefits of implementing these requirements are equally applicable to any Government or industry standards and calibration laboratory operations.

  6. Frequency Standards and Metrology

    NASA Astrophysics Data System (ADS)

    Maleki, Lute

    2009-04-01

    Preface / Lute Maleki -- Symposium history / Jacques Vanier -- Symposium photos -- pt. I. Fundamental physics. Variation of fundamental constants from the big bang to atomic clocks: theory and observations (Invited) / V. V. Flambaum and J. C. Berengut. Alpha-dot or not: comparison of two single atom optical clocks (Invited) / T. Rosenband ... [et al.]. Variation of the fine-structure constant and laser cooling of atomic dysprosium (Invited) / N. A. Leefer ... [et al.]. Measurement of short range forces using cold atoms (Invited) / F. Pereira Dos Santos ... [et al.]. Atom interferometry experiments in fundamental physics (Invited) / S. W. Chiow ... [et al.]. Space science applications of frequency standards and metrology (Invited) / M. Tinto -- pt. II. Frequency & metrology. Quantum metrology with lattice-confined ultracold Sr atoms (Invited) / A. D. Ludlow ... [et al.]. LNE-SYRTE clock ensemble: new [symbol]Rb hyperfine frequency measurement - spectroscopy of [symbol]Hg optical clock transition (Invited) / M. Petersen ... [et al.]. Precise measurements of S-wave scattering phase shifts with a juggling atomic clock (Invited) / S. Gensemer ... [et al.]. Absolute frequency measurement of the [symbol] clock transition (Invited) / M. Chwalla ... [et al.]. The semiclassical stochastic-field/atom interaction problem (Invited) / J. Camparo. Phase and frequency noise metrology (Invited) / E. Rubiola ... [et al.]. Optical spectroscopy of atomic hydrogen for an improved determination of the Rydberg constant / J. L. Flowers ... [et al.] -- pt. III. Clock applications in space. Recent progress on the ACES mission (Invited) / L. Cacciapuoti and C. Salomon. The SAGAS mission (Invited) / P. Wolf. Small mercury microwave ion clock for navigation and radioScience (Invited) / J. D. Prestage ... [et al.]. Astro-comb: revolutionizing precision spectroscopy in astrophysics (Invited) / C. E. Kramer ... [et al.]. High frequency very long baseline interferometry: frequency standards and

  7. Large-scale aerial images capture details of invasive plant populations

    Technology Transfer Automated Retrieval System (TEKTRAN)

    Satellite and aerial remote sensing have been successfully used to measure invasive weed infestations over very large areas, but have limited resolution. Ground-based methods have provided detailed measurements of invasive weeds, but can measure only limited areas. Here we test a novel approach th...

  8. ISSUES IN DIGITAL IMAGE PROCESSING OF AERIAL PHOTOGRAPHY FOR MAPPING SUBMERSED AQUATIC VEGETATION

    EPA Science Inventory

    The paper discusses the numerous issues that needed to be addressed when developing a methodology for mapping Submersed Aquatic Vegetation (SAV) from digital aerial photography. Specifically, we discuss 1) choice of film; 2) consideration of tide and weather constraints; 3) in-s...

  9. Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial image.

    PubMed

    Zhu, Boer; Wang, Xiangzhao; Li, Sikun; Yan, Guanyong; Shen, Lina; Duan, Lifeng

    2016-04-20

    A wavefront aberration measurement method for a hyper-NA lithographic projection lens by use of an aerial image based on principal component analysis is proposed. Aerial images of the hyper-NA lithographic projection lens are expressed accurately by using polarized light and a vector imaging model, as well as by considering the polarization properties. As a result, the wavefront aberrations of the hyper-NA lithographic projection lens are measured accurately. The lithographic simulator PROLITH is used to validate the accuracies of the wavefront aberration measurement and analyze the impact of the polarization rotation of illumination on the accuracy of the wavefront aberration measurement, as well as the degree of polarized light and the sample interval of aerial images. The result shows that the proposed method can retrieve 33 terms of Zernike coefficients (Z5-Z37) with a maximum error of less than 0.00085λ. PMID:27140087

  10. Industrial graphene metrology

    NASA Astrophysics Data System (ADS)

    Kyle, Jennifer Reiber; Ozkan, Cengiz S.; Ozkan, Mihrimah

    2012-06-01

    Graphene is an allotrope of carbon whose structure is based on one-atom-thick planar sheets of carbon atoms that are densely packed in a honeycomb crystal lattice. Its unique electrical and optical properties raised worldwide interest towards the design and fabrication of future electronic and optical devices with unmatched performance. At the moment, extensive efforts are underway to evaluate the reliability and performance of a number of such devices. With the recent advances in synthesizing large-area graphene sheets, engineers have begun investigating viable methodologies for conducting graphene metrology and quality control at industrial scales to understand a variety of reliability issues including defects, patternability, electrical, and physical properties. This review summarizes the current state of industrial graphene metrology and provides an overview of graphene metrology techniques. In addition, a recently developed large-area graphene metrology technique based on fluorescence quenching is introduced. For each metrology technique, the industrial metrics it measures are identified - layer thickness, edge structure, defects, Fermi level, and thermal conductivity - and a detailed description is provided as to how the measurements are performed. Additionally, the potential advantages of each technique for industrial use are identified, including throughput, scalability, sensitivity to substrate/environment, and on their demonstrated ability to achieve quantified results. The recently developed fluorescence-quenching metrology technique is shown to meet all the necessary criteria for industrial applications, rendering it the first industry-ready graphene metrology technique.

  11. Precision optical metrology without lasers

    NASA Astrophysics Data System (ADS)

    Bergmann, Ralf B.; Burke, Jan; Falldorf, Claas

    2015-07-01

    Optical metrology is a key technique when it comes to precise and fast measurement with a resolution down to the micrometer or even nanometer regime. The choice of a particular optical metrology technique and the quality of results depends on sample parameters such as size, geometry and surface roughness as well as user requirements such as resolution, measurement time and robustness. Interferometry-based techniques are well known for their low measurement uncertainty in the nm range, but usually require careful isolation against vibration and a laser source that often needs shielding for reasons of eye-safety. In this paper, we concentrate on high precision optical metrology without lasers by using the gradient based measurement technique of deflectometry and the finite difference based technique of shear interferometry. Careful calibration of deflectometry systems allows one to investigate virtually all kinds of reflecting surfaces including aspheres or free-form surfaces with measurement uncertainties below the μm level. Computational Shear Interferometry (CoSI) allows us to combine interferometric accuracy and the possibility to use cheap and eye-safe low-brilliance light sources such as e.g. fiber coupled LEDs or even liquid crystal displays. We use CoSI e.g. for quantitative phase contrast imaging in microscopy. We highlight the advantages of both methods, discuss their transfer functions and present results on the precision of both techniques.

  12. [Building Change Detection Based on Multi-Level Rules Classification with Airborne LiDAR Data and Aerial Images].

    PubMed

    Gong, Yi-long; Yan, Li

    2015-05-01

    The present paper proposes a new building change detection method combining Lidar point cloud with aerial image, using multi-level rules classification algorithm, to solve building change detection problem between these two kinds of heterogeneous data. Then, a morphological post-processing method combined with area threshold is proposed. Thus, a complete building change detection processing flow that can be applied to actual production is proposed. Finally, the effectiveness of the building change detection method is evaluated, processing the 2010 airborne LiDAR point cloud data and 2009 high resolution aerial image of Changchun City, Jilin province, China; in addition, compared with the object-oriented building change detection method based on support vector machine (SVM) classification, more analysis and evaluation of the suggested method is given. Experiment results show that the performance of the proposed building change detection method is ideal. Its Kappa index is 0. 90, and correctness is 0. 87, which is higher than the object-oriented building change detection method based on SVM classification. PMID:26415454

  13. Using GPS/INS data to enhance image matching for real-time aerial triangulation

    NASA Astrophysics Data System (ADS)

    Tanathong, Supannee; Lee, Impyeong

    2014-11-01

    Direct georeferencing is a promising technique for determining the exterior orientation parameters (EO) of a camera in real-time through the integration of GPS/INS sensors. Instead of using expensive devices, we improve the accuracy of the directly measured EOs through aerial triangulation (AT) and rely on tie-points. In this work, using GPS/INS data, we enhance the KLT tracker to achieve accuracy and speed that is compatible with real-time aerial triangulation. Given GPS/INS data from medium-grade sensors, the proposed system is 48% faster than the original work and tie-points extracted by our system are 6.33% more accurate and more evenly distributed than tie-points extracted by the original work. The AT processing results show that tie-points from the proposed work can reduce the RMSE of the directly measured EOs by 17.87% for position and 23.37% for attitude. Thus, we conclude that our proposed system can be integrated with real-time aerial triangulation.

  14. MaNIAC-UAV - a methodology for automatic pavement defects detection using images obtained by Unmanned Aerial Vehicles

    NASA Astrophysics Data System (ADS)

    Henrique Castelo Branco, Luiz; César Lima Segantine, Paulo

    2015-09-01

    Intelligent Transportation Systems - ITS is a set of integrated technologies (Remote Sensing, Image Processing, Communications Systems and others) that aim to offer services and advanced traffic management for the several transportation modes (road, air and rail). Collect data on the characteristics and conditions of the road surface and keep them update is an important and difficult task that needs to be currently managed in order to reduce accidents and vehicle maintenance costs. Nowadays several roads and highways are paved, but usually there is insufficient updated data about current condition and status. There are different types of pavement defects on the roads and to keep them in good condition they should be constantly monitored and maintained according to pavement management strategy. This paper presents a methodology to obtain, automatically, information about the conditions of the highway asphalt pavement. Data collection was done through remote sensing using an UAV (Unmanned Aerial Vehicle) and the image processing and pattern recognition techniques through Geographic Information System.

  15. Metrology Measurement Capabilities

    SciTech Connect

    Barnes, L.M.

    2003-11-12

    This document contains descriptions of Federal Manufacturing & Technologies (FM&T) Metrology capabilities, traceability flow charts, and the measurement uncertainty of each measurement capability. Metrology provides NIST traceable precision measurements or equipment calibration for a wide variety of parameters, ranges, and state-of-the-art uncertainties. Metrology laboratories conform to the requirements of the Department of Energy Development and Production Manual Chapter 8.4, ANSI/ISO/IEC ANSI/ISO/IEC 17025:2000, and ANSI/NCSL Z540-1 (equivalent to ISO Guide 25). FM&T Metrology laboratories are accredited by NVLAP for the parameters, ranges, and uncertainties listed in the specific scope of accreditation under NVLAP Lab code 200108-0. See the Internet at http://ts.nist.gov/ts/htdocs/210/214/scopes/2001080.pdf. These parameters are summarized in the table at the bottom of this introduction.

  16. Thin film metrology.

    PubMed

    Nitsch, Gerald; Flinn, Gregory

    2007-10-01

    Thin film metrology is suitable for characterising and performing quality control of a variety of coatings and films used in medical applications. The capabilities of today's systems are described. PMID:18078184

  17. Data exchange in metrology.

    PubMed

    Badger, P

    1996-01-01

    The adoption of the directives 71/316/EEC on measuring instruments and 90/384/EEC on non-automatic weighing instruments has resulted in a considerable quantity of certificates to be exchanged between the Central Metrological Authorities and the Local Metrological Authorities, in the member states. This requirement to exchange data, prompted the setting up of the WELMEC working group, to explore how computerisation could help the member states perform their tasks. PMID:10172832

  18. A methodology for near real-time change detection between Unmanned Aerial Vehicle and wide area satellite images

    NASA Astrophysics Data System (ADS)

    Fytsilis, Anastasios L.; Prokos, Anthony; Koutroumbas, Konstantinos D.; Michail, Dimitrios; Kontoes, Charalambos C.

    2016-09-01

    In this paper a novel integrated hybrid methodology for unsupervised change detection between Unmanned Aerial Vehicle (UAV) and satellite images, which can be utilized in various fields like security applications (e.g. border surveillance) and damage assessment, is proposed. This is a challenging problem mainly due to the difference in geographic coverage and the spatial resolution of the two images, as well as to the acquisition modes which lead to misregistration errors. The methodology consists of the following steps: (a) pre-processing, where the part of the satellite image that corresponds to the UAV image is determined and the UAV image is ortho-rectified using information provided by a Digital Terrain Model, (b) the detection of potential changes, which is based exclusively on intensity and image gradient information, (c) the generation of the region map, where homogeneous regions are produced by the previous potential changes via a seeded region growing algorithm and placed on the region map, and (d) the evaluation of the above regions, in order to characterize them as true changes or not. The methodology has been applied on demanding real datasets with very encouraging results. Finally, its robustness to the misregistration errors is assessed via extensive experimentation.

  19. Metrology Measurement Capabilities

    SciTech Connect

    Dr. Glen E. Gronniger

    2007-10-02

    This document contains descriptions of Federal Manufacturing & Technologies (FM&T) Metrology capabilities, traceability flow charts, and the measurement uncertainty of each measurement capability. Metrology provides NIST traceable precision measurements or equipment calibration for a wide variety of parameters, ranges, and state-of-the-art uncertainties. Metrology laboratories conform to the requirements of the Department of Energy Development and Production Manual Chapter 13.2, ANSI/ISO/IEC ANSI/ISO/IEC 17025:2005, and ANSI/NCSL Z540-1. FM&T Metrology laboratories are accredited by NVLAP for the parameters, ranges, and uncertainties listed in the specific scope of accreditation under NVLAP Lab code 200108-0. See the Internet at http://ts.nist.gov/Standards/scopes/2001080.pdf. These parameters are summarized. The Honeywell Federal Manufacturing & Technologies (FM&T) Metrology Department has developed measurement technology and calibration capability in four major fields of measurement: (1) Mechanical; (2) Environmental, Gas, Liquid; (3) Electrical (DC, AC, RF/Microwave); and (4) Optical and Radiation. Metrology Engineering provides the expertise to develop measurement capabilities for virtually any type of measurement in the fields listed above. A strong audit function has been developed to provide a means to evaluate the calibration programs of our suppliers and internal calibration organizations. Evaluation includes measurement audits and technical surveys.

  20. Detection of Tree Crowns Based on Reclassification Using Aerial Images and LIDAR Data

    NASA Astrophysics Data System (ADS)

    Talebi, S.; Zarea, A.; Sadeghian, S.; Arefi, H.

    2013-09-01

    Tree detection using aerial sensors in early decades was focused by many researchers in different fields including Remote Sensing and Photogrammetry. This paper is intended to detect trees in complex city areas using aerial imagery and laser scanning data. Our methodology is a hierarchal unsupervised method consists of some primitive operations. This method could be divided into three sections, in which, first section uses aerial imagery and both second and third sections use laser scanners data. In the first section a vegetation cover mask is created in both sunny and shadowed areas. In the second section Rate of Slope Change (RSC) is used to eliminate grasses. In the third section a Digital Terrain Model (DTM) is obtained from LiDAR data. By using DTM and Digital Surface Model (DSM) we would get to Normalized Digital Surface Model (nDSM). Then objects which are lower than a specific height are eliminated. Now there are three result layers from three sections. At the end multiplication operation is used to get final result layer. This layer will be smoothed by morphological operations. The result layer is sent to WG III/4 to evaluate. The evaluation result shows that our method has a good rank in comparing to other participants' methods in ISPRS WG III/4, when assessed in terms of 5 indices including area base completeness, area base correctness, object base completeness, object base correctness and boundary RMS. With regarding of being unsupervised and automatic, this method is improvable and could be integrate with other methods to get best results.

  1. Quantitative analysis of drainage obtained from aerial photographs and RBV/LANDSAT images

    NASA Technical Reports Server (NTRS)

    Dejesusparada, N. (Principal Investigator); Formaggio, A. R.; Epiphanio, J. C. N.; Filho, M. V.

    1981-01-01

    Data obtained from aerial photographs (1:60,000) and LANDSAT return beam vidicon imagery (1:100,000) concerning drainage density, drainage texture, hydrography density, and the average length of channels were compared. Statistical analysis shows that significant differences exist in data from the two sources. The highly drained area lost more information than the less drained area. In addition, it was observed that the loss of information about the number of rivers was higher than that about the length of the channels.

  2. Semi-automted analysis of high-resolution aerial images to quantify docks in Upper Midwest glacial lakes

    USGS Publications Warehouse

    Beck, Marcus W.; Vondracek, Bruce C.; Hatch, Lorin K.; Vinje, Jason

    2013-01-01

    Lake resources can be negatively affected by environmental stressors originating from multiple sources and different spatial scales. Shoreline development, in particular, can negatively affect lake resources through decline in habitat quality, physical disturbance, and impacts on fisheries. The development of remote sensing techniques that efficiently characterize shoreline development in a regional context could greatly improve management approaches for protecting and restoring lake resources. The goal of this study was to develop an approach using high-resolution aerial photographs to quantify and assess docks as indicators of shoreline development. First, we describe a dock analysis workflow that can be used to quantify the spatial extent of docks using aerial images. Our approach incorporates pixel-based classifiers with object-based techniques to effectively analyze high-resolution digital imagery. Second, we apply the analysis workflow to quantify docks for 4261 lakes managed by the Minnesota Department of Natural Resources. Overall accuracy of the analysis results was 98.4% (87.7% based on ) after manual post-processing. The analysis workflow was also 74% more efficient than the time required for manual digitization of docks. These analyses have immediate relevance for resource planning in Minnesota, whereas the dock analysis workflow could be used to quantify shoreline development in other regions with comparable imagery. These data can also be used to better understand the effects of shoreline development on aquatic resources and to evaluate the effects of shoreline development relative to other stressors.

  3. Fusion of aerial images with mean shift-based upsampled elevation data for improved building block classification

    NASA Astrophysics Data System (ADS)

    Gyftakis, S.; Tsenoglou, T.; Bratsolis, E.; Charou, Eleni; Vassilas, N.

    2014-10-01

    Nowadays there is an increasing demand for detailed 3D modeling of buildings using elevation data such as those acquired from LiDAR airborne scanners. The various techniques that have been developed for this purpose typically perform segmentation into homogeneous regions followed by boundary extraction and are based on some combination of LiDAR data, digital maps, satellite images and aerial orthophotographs. In the present work, our dataset includes an aerial RGB orthophoto, a DSM and a DTM with spatial resolutions of 20cm, 1m and 2m respectively. Next, a normalized DSM (nDSM) is generated and fused with the optical data in order to increase its resolution to 20cm. The proposed methodology can be described as a two-step approach. First, a nearest neighbor interpolation is applied on the low resolution nDSM to obtain a low quality, ragged, elevation image. Next, we performed a mean shift-based discontinuity preserving smoothing on the fused data. The outcome is on the one hand a more homogeneous RGB image, with smoothed terrace coloring while at the same time preserving the optical edges and on the other hand an upsampled elevation data with considerable improvement regarding region filling and "straightness" of elevation discontinuities. Besides the apparent visual assessment of the increased accuracy of building boundaries, the effectiveness of the proposed method is demonstrated using the processed dataset as input to five supervised classification methods. The performance of each method is evaluated using a subset of the test area as ground truth. Comparisons with classification results obtained with the original data demonstrate that preprocessing the input dataset using the mean shift algorithm improves significantly the performance of all tested classifiers for building block extraction.

  4. Object Based Agricultural Land Cover Classification Map of Shadowed Areas from Aerial Image and LIDAR Data Using Support Vector Machine

    NASA Astrophysics Data System (ADS)

    Alberto, R. T.; Serrano, S. C.; Damian, G. B.; Camaso, E. E.; Celestino, A. B.; Hernando, P. J. C.; Isip, M. F.; Orge, K. M.; Quinto, M. J. C.; Tagaca, R. C.

    2016-06-01

    Aerial image and LiDAR data offers a great possibility for agricultural land cover mapping. Unfortunately, these images leads to shadowy pixels. Management of shadowed areas for classification without image enhancement were investigated. Image segmentation approach using three different segmentation scales were used and tested to segment the image for ground features since only the ground features are affected by shadow caused by tall features. The RGB band and intensity were the layers used for the segmentation having an equal weights. A segmentation scale of 25 was found to be the optimal scale that will best fit for the shadowed and non-shadowed area classification. The SVM using Radial Basis Function kernel was then applied to extract classes based on properties extracted from the Lidar data and orthophoto. Training points for different classes including shadowed areas were selected homogeneously from the orthophoto. Separate training points for shadowed areas were made to create additional classes to reduced misclassification. Texture classification and object-oriented classifiers have been examined to reduced heterogeneity problem. The accuracy of the land cover classification using 25 scale segmentation after accounting for the shadow detection and classification was significantly higher compared to higher scale of segmentation.

  5. Metrology with μCT: precision challenge

    NASA Astrophysics Data System (ADS)

    Suppes, Alexander; Neuser, Eberhard

    2008-08-01

    Over the last years computed tomography (CT) with conventional x-ray sources has evolved from imaging method in medicine to a well established technology for industrial applications in the field of material science, microelectronics, geology, etc. By using modern microfocus and nanofocus® X-ray tubes, parts can be scanned with sub-micrometer resolutions. Currently, micro-CT is used more and more as a technology for metrological applications. Especially if complex parts with hidden or difficult accessible surfaces have to be measured, CT offers big advantages comparing with conventional tactile or optical coordinate measuring machines (CMMs): high density of measurement points and fast capturing of the complete sample's geometry. When using this modern technology the question arises how precise a CT based CMM can measure in comparison to conventional CMMs? To characterize the metrological capabilities of a tactile or optical CMM, internationally standardized characteristics like length measurement error and probing error are used. To increase the acceptance of CT as a metrological method, the definition and usage of these parameters is important. In this paper, an overview of the process chain in CT based metrology will be given and metrological characteristics will be described. With the help of a special material standard designed and calibrated by PTB-National Metrology Institute of Germany-the influence of methods for beam hardening correction and for surface extraction on the metrological characteristics will be analyzed. It will be shown that with modern micro-CT systems length measurement error of less than 1μm for an object diameter of 20 mm can be reached.

  6. Aerial Explorers

    NASA Technical Reports Server (NTRS)

    Young, Larry A.; Pisanich, Greg; Ippolito, Corey

    2005-01-01

    This paper presents recent results from a mission architecture study of planetary aerial explorers. In this study, several mission scenarios were developed in simulation and evaluated on success in meeting mission goals. This aerial explorer mission architecture study is unique in comparison with previous Mars airplane research activities. The study examines how aerial vehicles can find and gain access to otherwise inaccessible terrain features of interest. The aerial explorer also engages in a high-level of (indirect) surface interaction, despite not typically being able to takeoff and land or to engage in multiple flights/sorties. To achieve this goal, a new mission paradigm is proposed: aerial explorers should be considered as an additional element in the overall Entry, Descent, Landing System (EDLS) process. Further, aerial vehicles should be considered primarily as carrier/utility platforms whose purpose is to deliver air-deployed sensors and robotic devices, or symbiotes, to those high-value terrain features of interest.

  7. fibmeasure: Python/Cython module to find the center of back-illuminated optical fibers in metrology images

    NASA Astrophysics Data System (ADS)

    Gilbert, James

    2016-03-01

    fibmeasure finds the precise locations of the centers of back-illuminated optical fibers in images. It was developed for astronomical fiber positioning feedback via machine vision cameras and is optimized for high-magnification images where fibers appear as resolvable circles. It was originally written during the design of the WEAVE pick-and-place fiber positioner for the William Herschel Telescope.

  8. Using optical metrology to reconstruct sound recordings

    NASA Astrophysics Data System (ADS)

    Cornell, E. W.; Fadeyev, V.; Haber, C.; Jin, J.; Nordmeyer, R.; Golden, M.

    2007-09-01

    Prior to 1950 nearly all sound recordings were made on mechanical media such as wax, foil, shellac, lacquer, and plastic. Some of these older recordings contain material of great historical value or interest but are damaged, decaying, or now considered too delicate to play. Archives seek to preserve and also create broad access to their collections. An ongoing effort at Berkeley Lab has applied methods of optical metrology and image processing to reconstruct sound stored on these mechanical carriers. This approach was inspired by the use of precision optical metrology to align and fabricate silicon tracking arrays for high-energy physics experiments and by track finding and fitting data analysis methods. The technology has matured to the point that an optical metrology system for sound restoration has been designed and built for the Library of Congress.

  9. Metrology measurement capability

    NASA Astrophysics Data System (ADS)

    Shroyer, K.

    1995-01-01

    During the past 36 years, the Kansas City Division's (KCD) Metrology Department has developed measurement technology and calibration capability in four major areas of measurement: (1) Mechanical; (2) Environmental, Gas, Liquid; Electrical (D.C., A.C., RF/Microwave); and (3) Optical and Radiation. The capabilities developed include unique capabilities in many areas of measurement and engineering expertise to develop measurement techniques and resolve measurement problems in these major areas. KCD Metrology was established in 1958 to provide a measurement base for the Kansas City Plant. The Metrology Engineering Department provides the expertise to develop measurement capabilities for virtually any type of measurement which falls into the broad areas listed above. The engineering staff currently averages almost 19 years of measurement experience. A strong audit function has been developed to provide a means to evaluate the calibration programs of our suppliers and internal calibration organizations. This evaluation includes measurement audits and technical surveys. The requirements placed on Metrology require traceability of measurements to the National Institute of Standards and Technology or to nationally recognized methods or natural phenomena. A description of Metrology capabilities, traceability flow charts, and the measurement uncertainty of each of the measurement capabilities is contained in the following pages.

  10. Metrology measurement capabilities

    SciTech Connect

    Barnes, L.M.

    1997-06-01

    Since 1958, the AlliedSignal Federal Manufacturing and Technologies (FM and T) Metrology Department has developed measurement technology and calibration capability in four major areas of measurement: mechanical; environmental, gas, liquid; electrical (D.C., A.C., RF/microwave); and optical and radiation. The capabilities developed include unique capabilities in many areas of measurement and engineering expertise to develop measurement techniques and resolve measurement problems in these major areas. FM and T Metrology was established in 1958 to provide a measurement base for the Department of energy`s Kansas City Plant. The Metrology Engineering Department provides the expertise to develop measurement capabilities for virtually any type of measurement which falls into the broad areas listed above. The engineering staff currently averages almost 16 years of measurement experience. A strong audit function has been developed to provide a means to evaluate the calibration programs of the suppliers and internal calibration organizations. This evaluation includes measurement audits and technical surveys. The requirements placed on Metrology require traceability of measurements to the National Institute of Standards and Technology or to nationally recognized methods or natural phenomena. A description of Metrology capabilities, traceability flow charts, and the measurement uncertainty of each of the measurement capabilities is contained in this report.

  11. Metrology measurement capability

    SciTech Connect

    Shroyer, K.

    1995-01-01

    During the past 36 years, the Kansas City Division`s (KCD) Metrology Department has developed measurement technology and calibration capability in four major areas of measurement: (1) Mechanical; (2) Environmental, Gas, Liquid; Electrical (D.C., A.C., RF/Microwave); and (3) Optical and Radiation. The capabilities developed include unique capabilities in many areas of measurement and engineering expertise to develop measurement techniques and resolve measurement problems in these major areas. KCD Metrology was established in 1958 to provide a measurement base for the Kansas City Plant. The Metrology Engineering Department provides the expertise to develop measurement capabilities for virtually any type of measurement which falls into the broad areas listed above. The engineering staff currently averages almost 19 years of measurement experience. A strong audit function has been developed to provide a means to evaluate the calibration programs of our suppliers and internal calibration organizations. This evaluation includes measurement audits and technical surveys. The requirements placed on Metrology require traceability of measurements to the National Institute of Standards and Technology or to nationally recognized methods or natural phenomena. A description of Metrology capabilities, traceability flow charts, and the measurement uncertainty of each of the measurement capabilities is contained in the following pages.

  12. Building Roof Segmentation from Aerial Images Using a Line-and Region-Based Watershed Segmentation Technique

    PubMed Central

    Merabet, Youssef El; Meurie, Cyril; Ruichek, Yassine; Sbihi, Abderrahmane; Touahni, Raja

    2015-01-01

    In this paper, we present a novel strategy for roof segmentation from aerial images (orthophotoplans) based on the cooperation of edge- and region-based segmentation methods. The proposed strategy is composed of three major steps. The first one, called the pre-processing step, consists of simplifying the acquired image with an appropriate couple of invariant and gradient, optimized for the application, in order to limit illumination changes (shadows, brightness, etc.) affecting the images. The second step is composed of two main parallel treatments: on the one hand, the simplified image is segmented by watershed regions. Even if the first segmentation of this step provides good results in general, the image is often over-segmented. To alleviate this problem, an efficient region merging strategy adapted to the orthophotoplan particularities, with a 2D modeling of roof ridges technique, is applied. On the other hand, the simplified image is segmented by watershed lines. The third step consists of integrating both watershed segmentation strategies into a single cooperative segmentation scheme in order to achieve satisfactory segmentation results. Tests have been performed on orthophotoplans containing 100 roofs with varying complexity, and the results are evaluated with the VINETcriterion using ground-truth image segmentation. A comparison with five popular segmentation techniques of the literature demonstrates the effectiveness and the reliability of the proposed approach. Indeed, we obtain a good segmentation rate of 96% with the proposed method compared to 87.5% with statistical region merging (SRM), 84% with mean shift, 82% with color structure code (CSC), 80% with efficient graph-based segmentation algorithm (EGBIS) and 71% with JSEG. PMID:25648706

  13. A Mobile System for Measuring Water Surface Velocities Using Unmanned Aerial Vehicle and Large-Scale Particle Image Velocimetry

    NASA Astrophysics Data System (ADS)

    Chen, Y. L.

    2015-12-01

    Measurement technologies for velocity of river flow are divided into intrusive and nonintrusive methods. Intrusive method requires infield operations. The measuring process of intrusive methods are time consuming, and likely to cause damages of operator and instrument. Nonintrusive methods require fewer operators and can reduce instrument damages from directly attaching to the flow. Nonintrusive measurements may use radar or image velocimetry to measure the velocities at the surface of water flow. The image velocimetry, such as large scale particle image velocimetry (LSPIV) accesses not only the point velocity but the flow velocities in an area simultaneously. Flow properties of an area hold the promise of providing spatially information of flow fields. This study attempts to construct a mobile system UAV-LSPIV by using an unmanned aerial vehicle (UAV) with LSPIV to measure flows in fields. The mobile system consists of a six-rotor UAV helicopter, a Sony nex5T camera, a gimbal, an image transfer device, a ground station and a remote control device. The activate gimbal helps maintain the camera lens orthogonal to the water surface and reduce the extent of images being distorted. The image transfer device can monitor the captured image instantly. The operator controls the UAV by remote control device through ground station and can achieve the flying data such as flying height and GPS coordinate of UAV. The mobile system was then applied to field experiments. The deviation of velocities measured by UAV-LSPIV of field experiments and handhold Acoustic Doppler Velocimeter (ADV) is under 8%. The results of the field experiments suggests that the application of UAV-LSPIV can be effectively applied to surface flow studies.

  14. Research on the processing technology of low-altitude unmanned aerial vehicle images

    NASA Astrophysics Data System (ADS)

    Tang, Shihua; Liu, Yintao; Li, Feida; Zhou, Conglin; Huang, Qing; Xu, Hongwei

    2015-12-01

    The UAV system acts as one of the infrastructure of earth observation, with its mobility, high speed, flexibility, economy and other remarkable technical advantages, has been widely used in various fields of the national economic construction, such as agricultural monitoring, resource development, disaster emergency treatment. Taking an actual engineering as a case study in this paper, the method and the skill of making digital orthophoto map was stated by using the UASMaster, the professional UAV data processing software, based on the eBee unmanned aerial vehicle. Finally, the precision of the DOM was analyzed in detail through two methods, overlapping the DOM with the existing DLG of the region and contrasting the points of the existing DLG of 1:1000 scale with the corresponding checkpoints of the stereomodel.

  15. Unsupervised and stable LBG algorithm for data classification: application to aerial multicomponent images

    NASA Astrophysics Data System (ADS)

    Taher, A.; Chehdi, K.; Cariou, C.

    2015-10-01

    In this paper a stable and unsupervised Linde-Buzo-Gray (LBG) algorithm named LBGO is presented. The originality of the proposed algorithm relies: i) on the utilization of an adaptive incremental technique to initialize the class centres that calls into question the intermediate initializations; this technique makes the algorithm stable and deterministic, and the classification results do not vary from a run to another, and ii) on the unsupervised evaluation criteria of the intermediate classification result to estimate the optimal number of classes; this makes the algorithm unsupervised. The efficiency of this optimized version of LBG is shown through some experimental results on synthetic and real aerial hyperspectral data. More precisely we have tested our proposed classification approach regarding three aspects: firstly for its stability, secondly for its correct classification rate, and thirdly for the correct estimation of number of classes.

  16. Metrology Measurement Capabilities

    SciTech Connect

    Barnes, L.M.

    2000-03-23

    This document contains descriptions of Federal Manufacturing and Technologies (FM and T) Metrology capabilities, traceability flow charts, and the measurement uncertainty of each measurement capability. Metrology provides NIST traceable precision measurements or equipment calibration for a wide variety of parameters, ranges, and state-of-the-art uncertainties in laboratories that conform to the requirements of the Department of Energy Development and Production Manual Chapter 8.4, and ANSI/NCSL Z540-1 (equivalent to ISO Guide 25). FM and T Metrology laboratories are accredited by NVLAP for the parameters, ranges, and uncertainties listed in the specific scope of accreditation under NVLAP Lab code 200108-0. These parameters are summarized.

  17. Metrology measurement capabilities

    SciTech Connect

    Shroyer, K.

    1997-02-01

    Since 1958, the AlliedSignal Federal Manufacturing and Technologies (FM and T) Metrology Department has developed measurement technology and calibration capability in four major areas of measurement: (1) mechanical; (2) environmental, gas, liquid; (3) electrical (D.C., A.C., RF/Microwave); and (4) optical and radiation. The capabilities developed include unique capabilities in many areas of measurement and engineering expertise to develop measurement techniques and resolve measurement problems in these major areas. A strong audit function has been developed to provide a means to evaluate the calibration programs of the suppliers and internal calibration organizations. This evaluation includes measurement audits and technical surveys. The requirements placed on metrology require traceability of measurements to the National Institute of Standards and Technology or to nationally recognized methods or natural phenomena. A description of Metrology capabilities, traceability flow charts, and the measurement uncertainty of each of the measurement capabilities is contained in the report.

  18. Realizing "value-added" metrology

    NASA Astrophysics Data System (ADS)

    Bunday, Benjamin; Lipscomb, Pete; Allgair, John; Patel, Dilip; Caldwell, Mark; Solecky, Eric; Archie, Chas; Morningstar, Jennifer; Rice, Bryan J.; Singh, Bhanwar; Cain, Jason; Emami, Iraj; Banke, Bill, Jr.; Herrera, Alfredo; Ukraintsev, Vladamir; Schlessinger, Jerry; Ritchison, Jeff

    2007-03-01

    The conventional premise that metrology is a "non-value-added necessary evil" is a misleading and dangerous assertion, which must be viewed as obsolete thinking. Many metrology applications are key enablers to traditionally labeled "value-added" processing steps in lithography and etch, such that they can be considered integral parts of the processes. Various key trends in modern, state-of-the-art processing such as optical proximity correction (OPC), design for manufacturability (DFM), and advanced process control (APC) are based, at their hearts, on the assumption of fine-tuned metrology, in terms of uncertainty and accuracy. These trends are vehicles where metrology thus has large opportunities to create value through the engineering of tight and targetable process distributions. Such distributions make possible predictability in speed-sorts and in other parameters, which results in high-end product. Additionally, significant reliance has also been placed on defect metrology to predict, improve, and reduce yield variability. The necessary quality metrology is strongly influenced by not only the choice of equipment, but also the quality application of these tools in a production environment. The ultimate value added by metrology is a result of quality tools run by a quality metrology team using quality practices. This paper will explore the relationships among present and future trends and challenges in metrology, including equipment, key applications, and metrology deployment in the manufacturing flow. Of key importance are metrology personnel, with their expertise, practices, and metrics in achieving and maintaining the required level of metrology performance, including where precision, matching, and accuracy fit into these considerations. The value of metrology will be demonstrated to have shifted to "key enabler of large revenues," debunking the out-of-date premise that metrology is "non-value-added." Examples used will be from critical dimension (CD

  19. Region-Based 3d Surface Reconstruction Using Images Acquired by Low-Cost Unmanned Aerial Systems

    NASA Astrophysics Data System (ADS)

    Lari, Z.; Al-Rawabdeh, A.; He, F.; Habib, A.; El-Sheimy, N.

    2015-08-01

    Accurate 3D surface reconstruction of our environment has become essential for an unlimited number of emerging applications. In the past few years, Unmanned Aerial Systems (UAS) are evolving as low-cost and flexible platforms for geospatial data collection that could meet the needs of aforementioned application and overcome limitations of traditional airborne and terrestrial mobile mapping systems. Due to their payload restrictions, these systems usually include consumer-grade imaging and positioning sensor which will negatively impact the quality of the collected geospatial data and reconstructed surfaces. Therefore, new surface reconstruction surfaces are needed to mitigate the impact of using low-cost sensors on the final products. To date, different approaches have been proposed to for 3D surface construction using overlapping images collected by imaging sensor mounted on moving platforms. In these approaches, 3D surfaces are mainly reconstructed based on dense matching techniques. However, generated 3D point clouds might not accurately represent the scanned surfaces due to point density variations and edge preservation problems. In order to resolve these problems, a new region-based 3D surface renostruction trchnique is introduced in this paper. This approach aims to generate a 3D photo-realistic model of individually scanned surfaces within the captured images. This approach is initiated by a Semi-Global dense Matching procedure is carried out to generate a 3D point cloud from the scanned area within the collected images. The generated point cloud is then segmented to extract individual planar surfaces. Finally, a novel region-based texturing technique is implemented for photorealistic reconstruction of the extracted planar surfaces. Experimental results using images collected by a camera mounted on a low-cost UAS demonstrate the feasibility of the proposed approach for photorealistic 3D surface reconstruction.

  20. Rules for Optical Metrology

    NASA Technical Reports Server (NTRS)

    Stahl, H. Philip

    2014-01-01

    Based on 30 years of optical testing experience, a lot of mistakes, a lot of learning and a lot of experience, I have defined seven guiding principles for optical testing - regardless of how small or how large the optical testing or metrology task. GUIDING PRINCIPLES 1. Fully Understand the Task 2. Develop an Error Budget 3. Continuous Metrology Coverage 4. Know where you are 5. 'Test like you fly' 6. Independent Cross-Checks 7. Understand All Anomalies. These rules have been applied with great success to the in-process optical testing and final specification compliance testing of the JWST mirrors.

  1. Rules for Optical Metrology

    NASA Technical Reports Server (NTRS)

    Stahl, H. Philip

    2014-01-01

    Based on 30 years of optical testing experience, a lot of mistakes, a lot of learning and a lot of experience, I have defined seven guiding principles for optical testing - regardless of how small or how large the optical testing or metrology task. GUIDING PRINCIPLES 1.Fully Understand the Task 2.Develop an Error Budget 3.Continuous Metrology Coverage 4.Know where you are 5. 'Test like you fly' 6.Independent Cross-Checks 7.Understand All Anomalies. These rules have been applied with great success to the in-process optical testing and final specification compliance testing of the JWST mirrors.

  2. Scanning He+ Ion Beam Microscopy and Metrology

    SciTech Connect

    Joy, David C.

    2011-11-10

    The CD-SEM has been the tool of choice for the imaging and metrology of semiconductor devices for the past three decades but now, with critical dimensions at the nanometer scale, electron beam instruments can no longer deliver adequate performance. A scanning microscope using a He+ ion beam offers superior resolution and depth of field, and provides enhanced imaging contrast. Device metrology performed using ion beam imaging produces data which is comparable to or better than that from a conventional CD-SEM although there are significant differences in the experimental conditions required and in the details of image formation. The charging generated by a He+ beam, and the sample damage that it can cause, require care in operation but are not major problems.

  3. Validation of Vehicle Candidate Areas in Aerial Images Using Color Co-Occurrence Histograms

    NASA Astrophysics Data System (ADS)

    Leister, W.; Tuermer, S.; Reinartz, P.; Hoffmann, K. H.; Stilla, U.

    2013-10-01

    Traffic monitoring plays an important role in transportation management. In addition, airborne acquisition enables a flexible and realtime mapping for special traffic situations e.g. mass events and disasters. Also the automatic extraction of vehicles from aerial imagery is a common application. However, many approaches focus on the target object only. As an extension to previously developed car detection techniques, a validation scheme is presented. The focus is on exploiting the background of the vehicle candidates as well as their color properties in the HSV color space. Therefore, texture of the vehicle background is described by color co-occurrence histograms. From all resulting histograms a likelihood function is calculated giving a quantity value to indicate whether the vehicle candidate is correctly classified. Only a few robust parameters have to be determined. Finally, the strategy is tested with a dataset of dense urban areas from the inner city of Munich, Germany. First results show that certain regions which are often responsible for false positive detections, such as vegetation or road markings, can be excluded successfully.

  4. Mapping potential of digitized aerial photographs and space images for site-specific crop management

    NASA Astrophysics Data System (ADS)

    Nielsen, Gerald A.; Long, Daniel S.; Queen, Lloyd P.

    1996-11-01

    In site-specific crop management, treatments (e.g., fertilizer and herbicides) are applied precisely where they are needed. Global positioning system receivers allow accurate navigation of field implements and creation of crop yield maps. Remote sensing products help producers explain the wide range of yields shown on these maps and become the basis for digitized field management maps. Previous sources of remote sensing products for agriculture did not provide services that generated a sustained demand by crop producers, often because data were not delivered quickly enough. Public Access Resource Centers could provide a nearly uninterrupted electronic flow of data from NASA's MODIS and other sensors that could help producers and their advisors monitor crop conditions. This early warning/opportunity system would provide a low-cost way to discover conditions that merit examination on the ground. High-spatial-resolution digital aerial photographs or data from new commercial satellite companies would provide the basis for site-specific treatments. These detailed data are too expensive to acquire often and must be timed so as to represent differences in water supply characteristics and crop yield potentials. Remote sensing products must be linked to specific prescriptions that crop produces use to control operations and improve outcomes.

  5. New integrated Monte Carlo code for the simulation of high-resolution scanning electron microscopy images for metrology in microlithography

    NASA Astrophysics Data System (ADS)

    Ilgüsatiroglu, Emre; Illarionov, Alexey Yu.; Ciappa, Mauro; Pfäffli, Paul; Bomholt, Lars

    2014-04-01

    A new Monte Carlo code is presented that includes among others definition of arbitrary geometries with sub-nanometer resolution, high performance parallel computing capabilities, trapped charge, electric field calculation, electron tracking in electrostatic field, and calculation of 3D dose distributions. These functionalities are efficiently implemented thanks to the coupling of the Monte Carlo simulator with a TCAD environment. Applications shown are the synthesis of SEM linescans and images that focus on the evaluation of the impact of proximity effects and self charging on the quantitative extraction of critical dimensions in dense photoresist structures.

  6. Exploration of mineral resource deposits based on analysis of aerial and satellite image data employing artificial intelligence methods

    NASA Astrophysics Data System (ADS)

    Osipov, Gennady

    2013-04-01

    includes noncontact registration of eye motion, reconstruction of "attention landscape" fixed by the expert, recording the comments of the expert who is a specialist in the field of images` interpretation, and transfer this information into knowledge base.Creation of base of ophthalmologic images (OI) includes making semantic contacts from great number of OI based on analysis of OI and expert's comments.Processing of OI and making generalized OI (GOI) is realized by inductive logic algorithms and consists in synthesis of structural invariants of OI. The mode of recognition and interpretation of unknown images consists of several stages, which include: comparison of unknown image with the base of structural invariants of OI; revealing of structural invariants in unknown images; ynthesis of interpretive message of the structural invariants base and OI base (the experts` comments stored in it). We want to emphasize that the training mode does not assume special involvement of experts to teach the system - it is realized in the process of regular experts` work on image interpretation and it becomes possible after installation of a special apparatus for non contact registration of experts` attention. Consequently, the technology, which principles is described there, provides fundamentally new effective solution to the problem of exploration of mineral resource deposits based on computer analysis of aerial and satellite image data.

  7. Web-based metrology performance diagnostics

    NASA Astrophysics Data System (ADS)

    Sundaram, Ganesh; Mastovich, Martin E.; Avidor, Roye; Remillard, Jason; Brandom, Robert

    2003-05-01

    Current realities of tighter process tolerances combined with continued reduction in engineering resources per metrology tool require that every step of controlling a process a be made more efficient. Analyzing the quality of metrolgoy results, from equipment such as CD SEMs, can involve many factors that include image quality, measurement outputs, focus setting, and amplitude of system settings that play a role in the metrology results. The most efficient means of accessing large volumes of data today is via the World Wide Web. This paper provides examples of metrology problem resolutions that were achieved through the use of WWW on-line analysis of CD SEM results. The relational database that contains the measurement results, CD SEM settings, and metrology and pattern recognition images can be accessed from any fab PC, and can also be accessed from any fab PC, and can also be accessed from outside the fab by personnel with proper levels of security. Simple navigation through a web browser and the completeness of the data in the results database greatly improve the efficiency of the metrologist and the quality of the diagnosis, for improved process control and personal productivity.

  8. Hybrid metrology implementation: server approach

    NASA Astrophysics Data System (ADS)

    Osorio, Carmen; Timoney, Padraig; Vaid, Alok; Elia, Alex; Kang, Charles; Bozdog, Cornel; Yellai, Naren; Grubner, Eyal; Ikegami, Toru; Ikeno, Masahiko

    2015-03-01

    Hybrid metrology (HM) is the practice of combining measurements from multiple toolset types in order to enable or improve metrology for advanced structures. HM is implemented in two phases: Phase-1 includes readiness of the infrastructure to transfer processed data from the first toolset to the second. Phase-2 infrastructure allows simultaneous transfer and optimization of raw data between toolsets such as spectra, images, traces - co-optimization. We discuss the extension of Phase-1 to include direct high-bandwidth communication between toolsets using a hybrid server, enabling seamless fab deployment and further laying the groundwork for Phase-2 high volume manufacturing (HVM) implementation. An example of the communication protocol shows the information that can be used by the hybrid server, differentiating its capabilities from that of a host-based approach. We demonstrate qualification and production implementation of the hybrid server approach using CD-SEM and OCD toolsets for complex 20nm and 14nm applications. Finally we discuss the roadmap for Phase-2 HM implementation through use of the hybrid server.

  9. Accuracy in optical overlay metrology

    NASA Astrophysics Data System (ADS)

    Bringoltz, Barak; Marciano, Tal; Yaziv, Tal; DeLeeuw, Yaron; Klein, Dana; Feler, Yoel; Adam, Ido; Gurevich, Evgeni; Sella, Noga; Lindenfeld, Ze'ev; Leviant, Tom; Saltoun, Lilach; Ashwal, Eltsafon; Alumot, Dror; Lamhot, Yuval; Gao, Xindong; Manka, James; Chen, Bryan; Wagner, Mark

    2016-03-01

    In this paper we discuss the mechanism by which process variations determine the overlay accuracy of optical metrology. We start by focusing on scatterometry, and showing that the underlying physics of this mechanism involves interference effects between cavity modes that travel between the upper and lower gratings in the scatterometry target. A direct result is the behavior of accuracy as a function of wavelength, and the existence of relatively well defined spectral regimes in which the overlay accuracy and process robustness degrades (`resonant regimes'). These resonances are separated by wavelength regions in which the overlay accuracy is better and independent of wavelength (we term these `flat regions'). The combination of flat and resonant regions forms a spectral signature which is unique to each overlay alignment and carries certain universal features with respect to different types of process variations. We term this signature the `landscape', and discuss its universality. Next, we show how to characterize overlay performance with a finite set of metrics that are available on the fly, and that are derived from the angular behavior of the signal and the way it flags resonances. These metrics are used to guarantee the selection of accurate recipes and targets for the metrology tool, and for process control with the overlay tool. We end with comments on the similarity of imaging overlay to scatterometry overlay, and on the way that pupil overlay scatterometry and field overlay scatterometry differ from an accuracy perspective.

  10. Surface metrology by phase contrast

    NASA Astrophysics Data System (ADS)

    Baker, Lionel R.

    1990-08-01

    Increasing use of electrooptical imaging and detection systems in thermography high density information storage laser instrumentation and X-ray optics has led to a pressing need for machinecompatible sensors for the measurement of surface texture. This paper reviews recent advances in the use of deterministic and parametric noncontact methods for texture measurement and justifies the need for objective simple and yet precise means for displaying the microfinish of a machined surface. The design of a simple two channel phase contrast microscope is described which can be calibrated by test pieces and used as a means for optimising the process parameters involved in the generation of high quality surfaces. Typical results obtained with this technique including dynamic range and ultimate sensitivity are discussed. 1 . NEED FOR SURFACE METROLOGY Surface quality has a direct influence on product acceptability in many different industries including those concerned with optoelectronics and engineering. The influence may be cosmetic as with paint finish on a motor car body or functional for example when excessive wear rates may occur in a bearing surface with inadequate oil retention. Since perfection can never be achieved and overspecification can be costly it is clearly necessary to be able to define thresholds of acceptance in relation to different situations. Such thresholds do of course require agreed methods of measurement with traceability to national standards. The current trends in surface metrology are towards higher

  11. Fractal metrology for biogeosystems analysis

    NASA Astrophysics Data System (ADS)

    Torres-Argüelles, V.; Oleschko, K.; Tarquis, A. M.; Korvin, G.; Gaona, C.; Parrot, J.-F.; Ventura-Ramos, E.

    2010-06-01

    The solid-pore distribution pattern plays an important role in soil functioning being related with the main physical, chemical and biological multiscale and multitemporal processes. In the present research, this pattern is extracted from the digital images of three soils (Chernozem, Solonetz and "Chocolate'' Clay) and compared in terms of roughness of the gray-intensity distribution (the measurand) quantified by several measurement techniques. Special attention was paid to the uncertainty of each of them and to the measurement function which best fits to the experimental results. Some of the applied techniques are known as classical in the fractal context (box-counting, rescaling-range and wavelets analyses, etc.) while the others have been recently developed by our Group. The combination of all these techniques, coming from Fractal Geometry, Metrology, Informatics, Probability Theory and Statistics is termed in this paper Fractal Metrology (FM). We show the usefulness of FM through a case study of soil physical and chemical degradation applying the selected toolbox to describe and compare the main structural attributes of three porous media with contrasting structure but similar clay mineralogy dominated by montmorillonites.

  12. Fractal Metrology for biogeosystems analysis

    NASA Astrophysics Data System (ADS)

    Torres-Argüelles, V.; Oleschko, K.; Tarquis, A. M.; Korvin, G.; Gaona, C.; Parrot, J.-F.; Ventura-Ramos, E.

    2010-11-01

    The solid-pore distribution pattern plays an important role in soil functioning being related with the main physical, chemical and biological multiscale and multitemporal processes of this complex system. In the present research, we studied the aggregation process as self-organizing and operating near a critical point. The structural pattern is extracted from the digital images of three soils (Chernozem, Solonetz and "Chocolate" Clay) and compared in terms of roughness of the gray-intensity distribution quantified by several measurement techniques. Special attention was paid to the uncertainty of each of them measured in terms of standard deviation. Some of the applied methods are known as classical in the fractal context (box-counting, rescaling-range and wavelets analyses, etc.) while the others have been recently developed by our Group. The combination of these techniques, coming from Fractal Geometry, Metrology, Informatics, Probability Theory and Statistics is termed in this paper Fractal Metrology (FM). We show the usefulness of FM for complex systems analysis through a case study of the soil's physical and chemical degradation applying the selected toolbox to describe and compare the structural attributes of three porous media with contrasting structure but similar clay mineralogy dominated by montmorillonites.

  13. Frequency Standards and Metrology

    NASA Astrophysics Data System (ADS)

    Maleki, Lute

    2009-04-01

    Preface / Lute Maleki -- Symposium history / Jacques Vanier -- Symposium photos -- pt. I. Fundamental physics. Variation of fundamental constants from the big bang to atomic clocks: theory and observations (Invited) / V. V. Flambaum and J. C. Berengut. Alpha-dot or not: comparison of two single atom optical clocks (Invited) / T. Rosenband ... [et al.]. Variation of the fine-structure constant and laser cooling of atomic dysprosium (Invited) / N. A. Leefer ... [et al.]. Measurement of short range forces using cold atoms (Invited) / F. Pereira Dos Santos ... [et al.]. Atom interferometry experiments in fundamental physics (Invited) / S. W. Chiow ... [et al.]. Space science applications of frequency standards and metrology (Invited) / M. Tinto -- pt. II. Frequency & metrology. Quantum metrology with lattice-confined ultracold Sr atoms (Invited) / A. D. Ludlow ... [et al.]. LNE-SYRTE clock ensemble: new [symbol]Rb hyperfine frequency measurement - spectroscopy of [symbol]Hg optical clock transition (Invited) / M. Petersen ... [et al.]. Precise measurements of S-wave scattering phase shifts with a juggling atomic clock (Invited) / S. Gensemer ... [et al.]. Absolute frequency measurement of the [symbol] clock transition (Invited) / M. Chwalla ... [et al.]. The semiclassical stochastic-field/atom interaction problem (Invited) / J. Camparo. Phase and frequency noise metrology (Invited) / E. Rubiola ... [et al.]. Optical spectroscopy of atomic hydrogen for an improved determination of the Rydberg constant / J. L. Flowers ... [et al.] -- pt. III. Clock applications in space. Recent progress on the ACES mission (Invited) / L. Cacciapuoti and C. Salomon. The SAGAS mission (Invited) / P. Wolf. Small mercury microwave ion clock for navigation and radioScience (Invited) / J. D. Prestage ... [et al.]. Astro-comb: revolutionizing precision spectroscopy in astrophysics (Invited) / C. E. Kramer ... [et al.]. High frequency very long baseline interferometry: frequency standards and

  14. EROS Main Image File: A Picture Perfect Database for Landsat Imagery and Aerial Photography.

    ERIC Educational Resources Information Center

    Jack, Robert F.

    1984-01-01

    Describes Earth Resources Observation System online database, which provides access to computerized images of Earth obtained via satellite. Highlights include retrieval system and commands, types of images, search strategies, other online functions, and interpretation of accessions. Satellite information, sources and samples of accessions, and…

  15. A Method for Georeferencing Very-Large-Scale-Aerial (VLSA) Images in Sagebrush Steppe Communities.

    Technology Transfer Automated Retrieval System (TEKTRAN)

    VLSA imagery is captured with a digital camera, mounted on a light, piloted aircraft. VLSA images are high quality and have been used to measure cover of plant functional groups and some species, bare ground, litter, and rock, but the actual image location is known imprecisely (± 30 m). This impreci...

  16. Matching Aerial Images to 3d Building Models Based on Context-Based Geometric Hashing

    NASA Astrophysics Data System (ADS)

    Jung, J.; Bang, K.; Sohn, G.; Armenakis, C.

    2016-06-01

    In this paper, a new model-to-image framework to automatically align a single airborne image with existing 3D building models using geometric hashing is proposed. As a prerequisite process for various applications such as data fusion, object tracking, change detection and texture mapping, the proposed registration method is used for determining accurate exterior orientation parameters (EOPs) of a single image. This model-to-image matching process consists of three steps: 1) feature extraction, 2) similarity measure and matching, and 3) adjustment of EOPs of a single image. For feature extraction, we proposed two types of matching cues, edged corner points representing the saliency of building corner points with associated edges and contextual relations among the edged corner points within an individual roof. These matching features are extracted from both 3D building and a single airborne image. A set of matched corners are found with given proximity measure through geometric hashing and optimal matches are then finally determined by maximizing the matching cost encoding contextual similarity between matching candidates. Final matched corners are used for adjusting EOPs of the single airborne image by the least square method based on co-linearity equations. The result shows that acceptable accuracy of single image's EOP can be achievable by the proposed registration approach as an alternative to labour-intensive manual registration process.

  17. Weed Mapping in Early-Season Maize Fields Using Object-Based Analysis of Unmanned Aerial Vehicle (UAV) Images

    PubMed Central

    Peña, José Manuel; Torres-Sánchez, Jorge; de Castro, Ana Isabel; Kelly, Maggi; López-Granados, Francisca

    2013-01-01

    The use of remote imagery captured by unmanned aerial vehicles (UAV) has tremendous potential for designing detailed site-specific weed control treatments in early post-emergence, which have not possible previously with conventional airborne or satellite images. A robust and entirely automatic object-based image analysis (OBIA) procedure was developed on a series of UAV images using a six-band multispectral camera (visible and near-infrared range) with the ultimate objective of generating a weed map in an experimental maize field in Spain. The OBIA procedure combines several contextual, hierarchical and object-based features and consists of three consecutive phases: 1) classification of crop rows by application of a dynamic and auto-adaptive classification approach, 2) discrimination of crops and weeds on the basis of their relative positions with reference to the crop rows, and 3) generation of a weed infestation map in a grid structure. The estimation of weed coverage from the image analysis yielded satisfactory results. The relationship of estimated versus observed weed densities had a coefficient of determination of r2=0.89 and a root mean square error of 0.02. A map of three categories of weed coverage was produced with 86% of overall accuracy. In the experimental field, the area free of weeds was 23%, and the area with low weed coverage (<5% weeds) was 47%, which indicated a high potential for reducing herbicide application or other weed operations. The OBIA procedure computes multiple data and statistics derived from the classification outputs, which permits calculation of herbicide requirements and estimation of the overall cost of weed management operations in advance. PMID:24146963

  18. Weed mapping in early-season maize fields using object-based analysis of unmanned aerial vehicle (UAV) images.

    PubMed

    Peña, José Manuel; Torres-Sánchez, Jorge; de Castro, Ana Isabel; Kelly, Maggi; López-Granados, Francisca

    2013-01-01

    The use of remote imagery captured by unmanned aerial vehicles (UAV) has tremendous potential for designing detailed site-specific weed control treatments in early post-emergence, which have not possible previously with conventional airborne or satellite images. A robust and entirely automatic object-based image analysis (OBIA) procedure was developed on a series of UAV images using a six-band multispectral camera (visible and near-infrared range) with the ultimate objective of generating a weed map in an experimental maize field in Spain. The OBIA procedure combines several contextual, hierarchical and object-based features and consists of three consecutive phases: 1) classification of crop rows by application of a dynamic and auto-adaptive classification approach, 2) discrimination of crops and weeds on the basis of their relative positions with reference to the crop rows, and 3) generation of a weed infestation map in a grid structure. The estimation of weed coverage from the image analysis yielded satisfactory results. The relationship of estimated versus observed weed densities had a coefficient of determination of r(2)=0.89 and a root mean square error of 0.02. A map of three categories of weed coverage was produced with 86% of overall accuracy. In the experimental field, the area free of weeds was 23%, and the area with low weed coverage (<5% weeds) was 47%, which indicated a high potential for reducing herbicide application or other weed operations. The OBIA procedure computes multiple data and statistics derived from the classification outputs, which permits calculation of herbicide requirements and estimation of the overall cost of weed management operations in advance. PMID:24146963

  19. Use of Aerial Images for Regular Updates of Buildings in the Fundamental Base of Geographic Data of the Czech Republic

    NASA Astrophysics Data System (ADS)

    Hron, V.; Halounova, L.

    2015-03-01

    Digital aerial images (DAI) include position, elevation and also spectral information (visible bands and near-infrared band) about the captured area. The aim of this paper is to present the possibilities of automatic analysis of DAI for updating of the Fundamental Base of Geographic Data of the Czech Republic with a focus on buildings. Regular updates of buildings (automatic detection of new and demolished buildings) are based on the analysis of coloured point clouds created by an automatic image matching technique from each time period. The created approach compares point clouds from different time periods to each other. The advantage of this solution is that it is independent of the manner of keeping the buildings in the database. It does not matter whether the buildings in the database have correct positions and their footprints correspond to the roof shapes or external walls. The involved method is robust because a digital surface model generated by image matching techniques can contain numerous errors. Shaded areas and objects with blurred textures are problematic for automatic image correlation algorithms and lead to false results. For this reason, derived layers containing additional information are used. Shadow masks (layers with modelled shadows) are used for the verification of indications and to filter out errors in the shaded areas using a contextual evaluation. Furthermore, additional information about the road and railway networks and morphological operations of opening and closing were used to achieve more accurate results. All these information sources are then evaluated using decision logic, which uses the generally applicable rules that are available for different datasets without the need for modification. The method was tested on different datasets with various types of buildings (villages, suburbs and city centres) which cover more than 20 square kilometres. The developed solution leads to very promising results without the need of acquiring

  20. Detection of building changes from aerial images and light detection and ranging (LIDAR) data

    NASA Astrophysics Data System (ADS)

    Chen, Liang-Chien; Lin, Li-Jer

    2010-11-01

    Building models are built to provide three-dimensional (3-D) spatial information, which is needed in a variety of applications including city planning, construction management, location-based services of urban infrastructures, and the like. However, 3-D building models have to be updated on a timely manner to meet the changing demand. Rather than reconstructing building models for the entire area, it would be more convenient and effective to only update parts of the areas where there were changes. This paper aims at developing a new method, namely double-threshold strategy, to find such changes within 3-D building models in the region of interest with the aid of light detection and ranging (LIDAR) data. The proposed modeling scheme comprises three steps, namely, data pre-processing, change detection in building areas, and validation. In the first step for data pre-processing, data registration was carried out based on multi-source data. The second step for data pre-processing requires using the triangulation of an irregular network of data points collected by Light Detection And Ranging (LIDAR), focusing on those locations containing walls or other above-ground objects that were ever removed. Then, change detection in the building models can be made possible for finding differences in height by comparing the LIDAR point measurements and the estimates of the building models. The results may be further refined using spectral and feature information collected from aerial imagery. A double-threshold strategy was applied to cope with the highly sensitive thresholding often encountered when using the rule-based approach. Finally, ground truth data were used for model validation. Research findings clearly indicate that the double-threshold strategy improves the overall accuracy from 93.1% to 95.9%.

  1. Mobile Aerial Tracking and Imaging System (MATrIS) for Aeronautical Research

    NASA Technical Reports Server (NTRS)

    Banks, Daniel W.; Blanchard, Robert C.; Miller, Geoffrey M.

    2004-01-01

    A mobile, rapidly deployable ground-based system to track and image targets of aeronautical interest has been developed. Targets include reentering reusable launch vehicles as well as atmospheric and transatmospheric vehicles. The optics were designed to image targets in the visible and infrared wavelengths. To minimize acquisition cost and development time, the system uses commercially available hardware and software where possible. The conception and initial funding of this system originated with a study of ground-based imaging of global aerothermal characteristics of reusable launch vehicle configurations. During that study the National Aeronautics and Space Administration teamed with the Missile Defense Agency/Innovative Science and Technology Experimentation Facility to test techniques and analysis on two Space Shuttle flights.

  2. Matching Aerial Images to 3D Building Models Using Context-Based Geometric Hashing

    PubMed Central

    Jung, Jaewook; Sohn, Gunho; Bang, Kiin; Wichmann, Andreas; Armenakis, Costas; Kada, Martin

    2016-01-01

    A city is a dynamic entity, which environment is continuously changing over time. Accordingly, its virtual city models also need to be regularly updated to support accurate model-based decisions for various applications, including urban planning, emergency response and autonomous navigation. A concept of continuous city modeling is to progressively reconstruct city models by accommodating their changes recognized in spatio-temporal domain, while preserving unchanged structures. A first critical step for continuous city modeling is to coherently register remotely sensed data taken at different epochs with existing building models. This paper presents a new model-to-image registration method using a context-based geometric hashing (CGH) method to align a single image with existing 3D building models. This model-to-image registration process consists of three steps: (1) feature extraction; (2) similarity measure; and matching, and (3) estimating exterior orientation parameters (EOPs) of a single image. For feature extraction, we propose two types of matching cues: edged corner features representing the saliency of building corner points with associated edges, and contextual relations among the edged corner features within an individual roof. A set of matched corners are found with given proximity measure through geometric hashing, and optimal matches are then finally determined by maximizing the matching cost encoding contextual similarity between matching candidates. Final matched corners are used for adjusting EOPs of the single airborne image by the least square method based on collinearity equations. The result shows that acceptable accuracy of EOPs of a single image can be achievable using the proposed registration approach as an alternative to a labor-intensive manual registration process. PMID:27338410

  3. Matching Aerial Images to 3D Building Models Using Context-Based Geometric Hashing.

    PubMed

    Jung, Jaewook; Sohn, Gunho; Bang, Kiin; Wichmann, Andreas; Armenakis, Costas; Kada, Martin

    2016-01-01

    A city is a dynamic entity, which environment is continuously changing over time. Accordingly, its virtual city models also need to be regularly updated to support accurate model-based decisions for various applications, including urban planning, emergency response and autonomous navigation. A concept of continuous city modeling is to progressively reconstruct city models by accommodating their changes recognized in spatio-temporal domain, while preserving unchanged structures. A first critical step for continuous city modeling is to coherently register remotely sensed data taken at different epochs with existing building models. This paper presents a new model-to-image registration method using a context-based geometric hashing (CGH) method to align a single image with existing 3D building models. This model-to-image registration process consists of three steps: (1) feature extraction; (2) similarity measure; and matching, and (3) estimating exterior orientation parameters (EOPs) of a single image. For feature extraction, we propose two types of matching cues: edged corner features representing the saliency of building corner points with associated edges, and contextual relations among the edged corner features within an individual roof. A set of matched corners are found with given proximity measure through geometric hashing, and optimal matches are then finally determined by maximizing the matching cost encoding contextual similarity between matching candidates. Final matched corners are used for adjusting EOPs of the single airborne image by the least square method based on collinearity equations. The result shows that acceptable accuracy of EOPs of a single image can be achievable using the proposed registration approach as an alternative to a labor-intensive manual registration process. PMID:27338410

  4. Metrology for ultrasonic applications.

    PubMed

    Zeqiri, Bajram

    2007-01-01

    This paper provides a review of current metrological capability applied to the characterisation of the acoustic output of equipment used within medical ultrasonic applications. Key measurement devices, developed to underpin metrology in this area, are the radiation force balance, used to determine total output power, and the piezo-electric hydrophone, used to resolve the spatial and temporal distribution of acoustic pressure. The measurement infrastructure in place within the United Kingdom ensuring users are able to carry out traceable measurements of these quantities in a meaningful way, is described. This includes the relevant primary standards, the way international equivalence of national standards is demonstrated and the routes by which the standards are disseminated to the user community. Emerging measurement techniques that may in future lead to improved measurement capability, are also briefly discussed. PMID:17081597

  5. Metrology for drug delivery.

    PubMed

    Lucas, Peter; Klein, Stephan

    2015-08-01

    In various recently published studies, it is argued that there are underestimated risks with infusion technology, i.e., adverse incidents believed to be caused by inadequate administration of the drugs. This is particularly the case for applications involving very low-flow rates, i.e., <1 ml/h and applications involving drug delivery by means of multiple pumps. The risks in infusing are caused by a lack of awareness, incompletely understood properties of the complete drug delivery system and a lack of a proper metrological infrastructure for low-flow rates. Technical challenges such as these were the reason a European research project "Metrology for Drug Delivery" was started in 2011. In this special issue of Biomedical Engineering, the results of that project are discussed. PMID:25879307

  6. An Integrated Photogrammetric and Spatial Database Management System for Producing Fully Structured Data Using Aerial and Remote Sensing Images

    PubMed Central

    Ahmadi, Farshid Farnood; Ebadi, Hamid

    2009-01-01

    3D spatial data acquired from aerial and remote sensing images by photogrammetric techniques is one of the most accurate and economic data sources for GIS, map production, and spatial data updating. However, there are still many problems concerning storage, structuring and appropriate management of spatial data obtained using these techniques. According to the capabilities of spatial database management systems (SDBMSs); direct integration of photogrammetric and spatial database management systems can save time and cost of producing and updating digital maps. This integration is accomplished by replacing digital maps with a single spatial database. Applying spatial databases overcomes the problem of managing spatial and attributes data in a coupled approach. This management approach is one of the main problems in GISs for using map products of photogrammetric workstations. Also by the means of these integrated systems, providing structured spatial data, based on OGC (Open GIS Consortium) standards and topological relations between different feature classes, is possible at the time of feature digitizing process. In this paper, the integration of photogrammetric systems and SDBMSs is evaluated. Then, different levels of integration are described. Finally design, implementation and test of a software package called Integrated Photogrammetric and Oracle Spatial Systems (IPOSS) is presented. PMID:22574014

  7. An integrated photogrammetric and spatial database management system for producing fully structured data using aerial and remote sensing images.

    PubMed

    Ahmadi, Farshid Farnood; Ebadi, Hamid

    2009-01-01

    3D spatial data acquired from aerial and remote sensing images by photogrammetric techniques is one of the most accurate and economic data sources for GIS, map production, and spatial data updating. However, there are still many problems concerning storage, structuring and appropriate management of spatial data obtained using these techniques. According to the capabilities of spatial database management systems (SDBMSs); direct integration of photogrammetric and spatial database management systems can save time and cost of producing and updating digital maps. This integration is accomplished by replacing digital maps with a single spatial database. Applying spatial databases overcomes the problem of managing spatial and attributes data in a coupled approach. This management approach is one of the main problems in GISs for using map products of photogrammetric workstations. Also by the means of these integrated systems, providing structured spatial data, based on OGC (Open GIS Consortium) standards and topological relations between different feature classes, is possible at the time of feature digitizing process. In this paper, the integration of photogrammetric systems and SDBMSs is evaluated. Then, different levels of integration are described. Finally design, implementation and test of a software package called Integrated Photogrammetric and Oracle Spatial Systems (IPOSS) is presented. PMID:22574014

  8. Infrared Surveys of Hawaiian Volcanoes: Aerial surveys with infrared imaging radiometer depict volcanic thermal patterns and structural features.

    PubMed

    Fisher, W A; Moxham, R M; Polcyn, F; Landis, G H

    1964-11-01

    Aerial infrared-sensor surveys of Kilauea volcano have depicted the areal extent and the relative intensity of abnormal thermal features in the caldera area of the volcano and along its associated rift zones. Many of these anomalies show correlation with visible steaming and reflect convective transfer of heat to the surface from subterranean sources. Structural details of the volcano, some not evident from surface observation, are also delineated by their thermal abnormalities. Several changes were observed in the patterns of infrared emission during the period of study; two such changes show correlation in location with subsequent eruptions, but the cause-and-effect relationship is uncertain. Thermal anomalies were also observed on the southwest flank of Mauna Loa; images of other volcanoes on the island of Hawaii, and of Haleakala on the island of Maui, revealed no thermal abnormalities. Approximately 25 large springs issuing into the ocean around the periphery of Hawaii have been detected. Infrared emission varies widely with surface texture and composition, suggesting that similar observations may have value for estimating surface conditions on the moon or planets. PMID:17729994

  9. Application of Technical Measures and Software in Constructing Photorealistic 3D Models of Historical Building Using Ground-Based and Aerial (UAV) Digital Images

    NASA Astrophysics Data System (ADS)

    Zarnowski, Aleksander; Banaszek, Anna; Banaszek, Sebastian

    2015-12-01

    Preparing digital documentation of historical buildings is a form of protecting cultural heritage. Recently there have been several intensive studies using non-metric digital images to construct realistic 3D models of historical buildings. Increasingly often, non-metric digital images are obtained with unmanned aerial vehicles (UAV). Technologies and methods of UAV flights are quite different from traditional photogrammetric approaches. The lack of technical guidelines for using drones inhibits the process of implementing new methods of data acquisition. This paper presents the results of experiments in the use of digital images in the construction of photo-realistic 3D model of a historical building (Raphaelsohns' Sawmill in Olsztyn). The aim of the study at the first stage was to determine the meteorological and technical conditions for the acquisition of aerial and ground-based photographs. At the next stage, the technology of 3D modelling was developed using only ground-based or only aerial non-metric digital images. At the last stage of the study, an experiment was conducted to assess the possibility of 3D modelling with the comprehensive use of aerial (UAV) and ground-based digital photographs in terms of their labour intensity and precision of development. Data integration and automatic photo-realistic 3D construction of the models was done with Pix4Dmapper and Agisoft PhotoScan software Analyses have shown that when certain parameters established in an experiment are kept, the process of developing the stock-taking documentation for a historical building moves from the standards of analogue to digital technology with considerably reduced cost.

  10. Aerial multispectral imaging for cotton yield estimation under different irrigation and nitrogen treatments

    Technology Transfer Automated Retrieval System (TEKTRAN)

    Cotton yield varied spatially within a field. The variability can be caused by various production inputs such as soil property, water management, and fertilizer application. Airborne multispectral imaging is capable of providing data and information to study effects of the inputs on the yield qualit...

  11. Assessing the Accuracy of Ortho-image using Photogrammetric Unmanned Aerial System

    NASA Astrophysics Data System (ADS)

    Jeong, H. H.; Park, J. W.; Kim, J. S.; Choi, C. U.

    2016-06-01

    Smart-camera can not only be operated under network environment anytime and any place but also cost less than the existing photogrammetric UAV since it provides high-resolution image, 3D location and attitude data on a real-time basis from a variety of built-in sensors. This study's proposed UAV photogrammetric method, low-cost UAV and smart camera were used. The elements of interior orientation were acquired through camera calibration. The image triangulation was conducted in accordance with presence or absence of consideration of the interior orientation (IO) parameters determined by camera calibration, The Digital Elevation Model (DEM) was constructed using the image data photographed at the target area and the results of the ground control point survey. This study also analyzes the proposed method's application possibility by comparing a Ortho-image the results of the ground control point survey. Considering these study findings, it is suggested that smartphone is very feasible as a payload for UAV system. It is also expected that smartphone may be loaded onto existing UAV playing direct or indirect roles significantly.

  12. Advances in hardware, software, and automation for 193nm aerial image measurement systems

    NASA Astrophysics Data System (ADS)

    Zibold, Axel M.; Schmid, R.; Seyfarth, A.; Waechter, M.; Harnisch, W.; Doornmalen, H. v.

    2005-05-01

    A new, second generation AIMS fab 193 system has been developed which is capable of emulating lithographic imaging of any type of reticles such as binary and phase shift masks (PSM) including resolution enhancement technologies (RET) such as optical proximity correction (OPC) or scatter bars. The system emulates the imaging process by adjustment of the lithography equivalent illumination and imaging conditions of 193nm wafer steppers including circular, annular, dipole and quadrupole type illumination modes. The AIMS fab 193 allows a rapid prediction of wafer printability of critical mask features, including dense patterns and contacts, defects or repairs by acquiring through-focus image stacks by means of a CCD camera followed by quantitative image analysis. Moreover the technology can be readily applied to directly determine the process window of a given mask under stepper imaging conditions. Since data acquisition is performed electronically, AIMS in many applications replaces the need for costly and time consuming wafer prints using a wafer stepper/ scanner followed by CD SEM resist or wafer analysis. The AIMS fab 193 second generation system is designed for 193nm lithography mask printing predictability down to the 65nm node. In addition to hardware improvements a new modular AIMS software is introduced allowing for a fully automated operation mode. Multiple pre-defined points can be visited and through-focus AIMS measurements can be executed automatically in a recipe based mode. To increase the effectiveness of the automated operation mode, the throughput of the system to locate the area of interest, and to acquire the through-focus images is increased by almost a factor of two in comparison with the first generation AIMS systems. In addition a new software plug-in concept is realised for the tools. One new feature has been successfully introduced as "Global CD Map", enabling automated investigation of global mask quality based on the local determination of

  13. Quantum metrology and its application in biology

    NASA Astrophysics Data System (ADS)

    Taylor, Michael A.; Bowen, Warwick P.

    2016-02-01

    Quantum metrology provides a route to overcome practical limits in sensing devices. It holds particular relevance to biology, where sensitivity and resolution constraints restrict applications both in fundamental biophysics and in medicine. Here, we review quantum metrology from this biological context, focusing on optical techniques due to their particular relevance for biological imaging, sensing, and stimulation. Our understanding of quantum mechanics has already enabled important applications in biology, including positron emission tomography (PET) with entangled photons, magnetic resonance imaging (MRI) using nuclear magnetic resonance, and bio-magnetic imaging with superconducting quantum interference devices (SQUIDs). In quantum metrology an even greater range of applications arise from the ability to not just understand, but to engineer, coherence and correlations at the quantum level. In the past few years, quite dramatic progress has been seen in applying these ideas into biological systems. Capabilities that have been demonstrated include enhanced sensitivity and resolution, immunity to imaging artefacts and technical noise, and characterization of the biological response to light at the single-photon level. New quantum measurement techniques offer even greater promise, raising the prospect for improved multi-photon microscopy and magnetic imaging, among many other possible applications. Realization of this potential will require cross-disciplinary input from researchers in both biology and quantum physics. In this review we seek to communicate the developments of quantum metrology in a way that is accessible to biologists and biophysicists, while providing sufficient details to allow the interested reader to obtain a solid understanding of the field. We further seek to introduce quantum physicists to some of the central challenges of optical measurements in biological science. We hope that this will aid in bridging the communication gap that exists

  14. Optical metrology for advanced process control: full module metrology solutions

    NASA Astrophysics Data System (ADS)

    Bozdog, Cornel; Turovets, Igor

    2016-03-01

    Optical metrology is the workhorse metrology in manufacturing and key enabler to patterning process control. Recent advances in device architecture are gradually shifting the need for process control from the lithography module to other patterning processes (etch, trim, clean, LER/LWR treatments, etc..). Complex multi-patterning integration solutions, where the final pattern is the result of multiple process steps require a step-by-step holistic process control and a uniformly accurate holistic metrology solution for pattern transfer for the entire module. For effective process control, more process "knobs" are needed, and a tighter integration of metrology with process architecture.

  15. MEMS metrology techniques

    NASA Astrophysics Data System (ADS)

    Novak, Erik

    2004-12-01

    The MEMS industry currently produces over $13 billion in annual revenue, with devices in such diverse applications as blood pressure sensors, projection displays, optical switches, printers, hard drives, and gyroscopes. As production techniques improve, ever more functions may be served by MEMS, and the industry is growing at an annual rate of more than 15%. The large diversity of MEMS leads to many challenges in metrology, as each design has different critical factors which will affect its performance. Unlike traditional semiconductor devices, MEMS require characterization both in their static state and under actuation. Parameters of interest include shape, dimensions, surface roughness, sidewall angles, film thickness, residual stress, feature volumes, response times, thermal properties, resonance frequencies, stiction, environmental immunity and more. This talk will discuss the strengths and weaknesses of a variety of techniques for MEMS surface metrology. Bright- and dark-field microscopy, scanning electron microscopy, contact and non-contact surface profilometry, atomic force microscopy, laser Doppler vibrometry and digital holography are some of the primary techniques used to evaluate MEMS surfaces and motion. While no single technique can fully characterize all MEMS devices, or even one device under all conditions, the utility of each of the different types of instruments is increasing as they are pushed by MEMS and other industries to provide more characterization capability. With a broad understanding of the various metrology techniques available, the one or few critical instruments to measure a given class of devices will hopefully be more easily understood.

  16. MEMS metrology techniques

    NASA Astrophysics Data System (ADS)

    Novak, Erik

    2005-01-01

    The MEMS industry currently produces over $13 billion in annual revenue, with devices in such diverse applications as blood pressure sensors, projection displays, optical switches, printers, hard drives, and gyroscopes. As production techniques improve, ever more functions may be served by MEMS, and the industry is growing at an annual rate of more than 15%. The large diversity of MEMS leads to many challenges in metrology, as each design has different critical factors which will affect its performance. Unlike traditional semiconductor devices, MEMS require characterization both in their static state and under actuation. Parameters of interest include shape, dimensions, surface roughness, sidewall angles, film thickness, residual stress, feature volumes, response times, thermal properties, resonance frequencies, stiction, environmental immunity and more. This talk will discuss the strengths and weaknesses of a variety of techniques for MEMS surface metrology. Bright- and dark-field microscopy, scanning electron microscopy, contact and non-contact surface profilometry, atomic force microscopy, laser Doppler vibrometry and digital holography are some of the primary techniques used to evaluate MEMS surfaces and motion. While no single technique can fully characterize all MEMS devices, or even one device under all conditions, the utility of each of the different types of instruments is increasing as they are pushed by MEMS and other industries to provide more characterization capability. With a broad understanding of the various metrology techniques available, the one or few critical instruments to measure a given class of devices will hopefully be more easily understood.

  17. Comparison of DSMs acquired by terrestrial laser scanning, UAV-based aerial images and ground-based optical images at the Super-Sauze landslide

    NASA Astrophysics Data System (ADS)

    Rothmund, Sabrina; Niethammer, Uwe; Walter, Marco; Joswig, Manfred

    2013-04-01

    In recent years, the high-resolution and multi-temporal 3D mapping of the Earth's surface using terrestrial laser scanning (TLS), ground-based optical images and especially low-cost UAV-based aerial images (Unmanned Aerial Vehicle) has grown in importance. This development resulted from the progressive technical improvement of the imaging systems and the freely available multi-view stereo (MVS) software packages. These different methods of data acquisition for the generation of accurate, high-resolution digital surface models (DSMs) were applied as part of an eight-week field campaign at the Super-Sauze landslide (South French Alps). An area of approximately 10,000 m² with long-term average displacement rates greater than 0.01 m/day has been investigated. The TLS-based point clouds were acquired at different viewpoints with an average point spacing between 10 to 40 mm and at different dates. On these days, more than 50 optical images were taken on points along a predefined line on the side part of the landslide by a low-cost digital compact camera. Additionally, aerial images were taken by a radio-controlled mini quad-rotor UAV equipped with another low-cost digital compact camera. The flight altitude ranged between 20 m and 250 m and produced a corresponding ground resolution between 0.6 cm and 7 cm. DGPS measurements were carried out as well in order to geo-reference and validate the point cloud data. To generate unscaled photogrammetric 3D point clouds from a disordered and tilted image set, we use the widespread open-source software package Bundler and PMVS2 (University of Washington). These multi-temporal DSMs are required on the one hand to determine the three-dimensional surface deformations and on the other hand it will be required for differential correction for orthophoto production. Drawing on the example of the acquired data at the Super-Sauze landslide, we demonstrate the potential but also the limitations of the photogrammetric point clouds. To

  18. Urban 3D GIS From LiDAR and digital aerial images

    NASA Astrophysics Data System (ADS)

    Zhou, Guoqing; Song, C.; Simmers, J.; Cheng, P.

    2004-05-01

    This paper presents a method, which integrates image knowledge and Light Detection And Ranging (LiDAR) point cloud data for urban digital terrain model (DTM) and digital building model (DBM) generation. The DBM is an Object-Oriented data structure, in which each building is considered as a building object, i.e., an entity of the building class. The attributes of each building include roof types, polygons of the roof surfaces, height, parameters describing the roof surfaces, and the LiDAR point array within the roof surfaces. Each polygon represents a roof surface of building. This type of data structure is flexible for adding other building attributes in future, such as texture information and wall information. Using image knowledge extracted, we developed a new method of interpolating LiDAR raw data into grid digital surface model (DSM) with considering the steep discontinuities of buildings. In this interpolation method, the LiDAR data points, which are located in the polygon of roof surfaces, first are determined, and then interpolation via planar equation is employed for grid DSM generation. The basic steps of our research are: (1) edge detection by digital image processing algorithms; (2) complete extraction of the building roof edges by digital image processing and human-computer interactive operation; (3) establishment of DBM; (4) generation of DTM by removing surface objects. Finally, we implement the above functions by MS VC++ programming. The outcome of urban 3D DSM, DTM and DBM is exported into urban database for urban 3D GIS.

  19. Review of night vision metrology

    NASA Astrophysics Data System (ADS)

    Chrzanowski, K.

    2015-06-01

    A review of night vision metrology is presented in this paper. A set of reasons that create a rather chaotic metrologic situation on night vision market is presented. It is shown that there has been made a little progress in night vision metrology during last decades in spite of a big progress in night vision technology at the same period of time. It is concluded that such a big discrep- ancy between metrology development level and technology development can be an obstacle in the further development of night vision technology.

  20. Theoretical study for aerial image intensity in resist in high numerical aperture projection optics and experimental verification with one-dimensional patterns

    NASA Astrophysics Data System (ADS)

    Shibuya, Masato; Takada, Akira; Nakashima, Toshiharu

    2016-04-01

    In optical lithography, high-performance exposure tools are indispensable to obtain not only fine patterns but also preciseness in pattern width. Since an accurate theoretical method is necessary to predict these values, some pioneer and valuable studies have been proposed. However, there might be some ambiguity or lack of consensus regarding the treatment of diffraction by object, incoming inclination factor onto image plane in scalar imaging theory, and paradoxical phenomenon of the inclined entrance plane wave onto image in vector imaging theory. We have reconsidered imaging theory in detail and also phenomenologically resolved the paradox. By comparing theoretical aerial image intensity with experimental pattern width for one-dimensional pattern, we have validated our theoretical consideration.

  1. The Micro-Arcsecond Metrology Testbed

    NASA Technical Reports Server (NTRS)

    Goullioud, Renaud; Hines, Braden; Bell, Charles; Shen, Tsae-Pyng; Bloemhof, Eric; Zhao, Feng; Regehr, Martin; Holmes, Howard; Irigoyen, Robert; Neat, Gregory

    2003-01-01

    The Micro-Arcsecond Metrology (MAM) testbed is a ground-based system of optical and electronic equipment for testing components, systems, and engineering concepts for the Space Interferometer Mission (SIM) and similar future missions, in which optical interferometers will be operated in outer space. In addition, the MAM testbed is of interest in its own right as a highly precise metrological system. The designs of the SIM interferometer and the MAM testbed reflect a requirement to measure both the position of the starlight central fringe and the change in the internal optical path of the interferometer with sufficient spatial resolution to generate astrometric data with angular resolution at the microarcsecond level. The internal path is to be measured by use of a small metrological laser beam of 1,319-nm wavelength, whereas the position of the starlight fringe is to be estimated by use of a charge-coupled-device (CCD) image detector sampling a large concentric annular beam. For the SIM to succeed, the optical path length determined from the interferometer fringes must be tracked by the metrological subsystem to within tens of picometers, through all operational motions of an interferometer delay line and siderostats. The purpose of the experiments performed on the MAM testbed is to demonstrate this agreement in a large-scale simulation that includes a substantial portion of the system in the planned configuration for operation in outer space. A major challenge in this endeavor is to align the metrological beam with the starlight beam in order to maintain consistency between the metrological and starlight subsystems at the system level. The MAM testbed includes an optical interferometer with a white light source, all major optical components of a stellar interferometer, and heterodyne metrological sensors. The aforementioned subsystems are installed in a large vacuum chamber in order to suppress atmospheric and thermal disturbances. The MAM is divided into two

  2. Remote sensing for precision agriculture: Within-field spatial variability analysis and mapping with aerial digital multispectral images

    NASA Astrophysics Data System (ADS)

    Gopalapillai, Sreekala

    2000-10-01

    Advances in remote sensing technology and biological sensors provided the motivation for this study on the applications of aerial multispectral remote sensing in precision agriculture. The feasibility of using high-resolution multispectral remote sensing for precision farming applications such as soil type delineation, identification of crop nitrogen levels, and modeling and mapping of weed density distribution and yield potential within a crop field was explored in this study. Some of the issues such as image calibration for variable lighting conditions and soil background influence were also addressed. Intensity normalization and band ratio methods were found to be adequate image calibration methods to compensate for variable illumination and soil background influence. Several within-field variability factors such as growth stage, field conditions, nutrient availability, crop cultivar, and plant population were found to be dominant in different periods. Unsupervised clustering of color infrared (CIR) image of a field soil was able to identify soil mapping units with an average accuracy of 76%. Spectral reflectance from a crop field was highly correlated to the chlorophyll reading. A regression model developed to predict nitrogen stress in corn identified nitrogen-stressed areas from nitrogen-sufficient areas with a high accuracy (R2 = 0.93). Weed density was highly correlated to the spectral reflectance from a field. One month after planting was found to be a good time to map spatial weed density. The optimum range of resolution for weed mapping was 4 m to 4.5 m for the remote sensing system and the experimental field used in this study. Analysis of spatial yield with respect to spectral reflectance showed that the visible and NIR reflectance were negatively correlated to yield and crop population in heavily weed-infested areas. The yield potential was highly correlated to image indices, especially to normalized brightness. The ANN model developed for one of the

  3. Integration of historical aerial and satellite photos, recent satellite images and geophysical surveys for the knowledge of the ancient Dyrrachium (Durres, Albania)

    NASA Astrophysics Data System (ADS)

    Malfitana, Daniele; Shehi, Eduard; Masini, Nicola; Scardozzi, Giuseppe

    2010-05-01

    The paper presents the preliminary results of an integrated multidiscipliary research project concerning the urban area of the modern Durres (ancient Dyrrachium). Here a joint Italian and Albanian researcher are starting preliminary investigations on the place of an ancient roman villa placed in the urban centre of the modern town. In a initial phase are offering interesting results the use of a rich multitemporal remote sensing data-set, historical aerial photos of 1920s and 1930s, photos of USA spy satellites of 1960s and 1970s (Corona KH-4A and KH-4B), and very high resolution satellite imagery. The historical aerial documentation is very rich and includes aerial photogrammetrich flights of two Italian Institutions: the private company SARA - Società Anonima Rilevamenti Aerofotogrammetrici in Rome (1928) and the IGM - Istituto Geografico Militare (1936, 1937 e 1941), which flew on Durres for purposes of cartographic production and military. These photos offer an image of the city before the urban expansion after the Second World War and in recent decades, progressively documented by satellite images of the 1960s-1970s and recent years. They enable a reconstruction of the ancient topography of the urban area, even with the possibility of detailed analysis, as in the case of the the Roman villa, nowadays buried under a modern garden, but also investigated with a GPR survey, in order to rebuild its plan and contextualize the villa in relation to the urban area of the ancient Dyrrachium.

  4. Geomatics techniques applied to time series of aerial images for multitemporal geomorphological analysis of the Miage Glacier (Mont Blanc).

    NASA Astrophysics Data System (ADS)

    Perotti, Luigi; Carletti, Roberto; Giardino, Marco; Mortara, Giovanni

    2010-05-01

    The Miage glacier is the major one in the Italian side of the Mont Blanc Massif, the third by area and the first by longitudinal extent among Italian glaciers. It is a typical debris covered glacier, since the end of the L.I.A. The debris coverage reduces ablation, allowing a relative stability of the glacier terminus, which is characterized by a wide and articulated moraine apparatus. For its conservative landforms, the Miage Glacier has a great importance for the analysis of the geomorphological response to recent climatic changes. Thanks to an organized existing archive of multitemporal aerial images (1935 to present) a photogrammetric approach has been applied to detect recent geomorphological changes in the Miage glacial basin. The research team provided: a) to digitize all the available images (still in analogic form) through photogrammetric scanners (very low image distortions devices) taking care of correctly defining the resolution of the acquisition compared to the scale mapping images are suitable for; b) to import digitized images into an appropriate digital photogrammetry software environment; c) to manage images in order, where possible, to carried out the stereo models orientation necessary for 3D navigation and plotting of critical geometric features of the glacier. Recognized geometric feature, referring to different periods, can be transferred to vector layers and imported in a GIS for further comparisons and investigations; d) to produce multi-temporal Digital Elevation Models for glacier volume changes; e) to perform orthoprojection of such images to obtain multitemporal orthoimages useful for areal an planar terrain evaluation and thematic analysis; f) to evaluate both planimetric positioning and height determination accuracies reachable through the photogrammetric process. Users have to known reliability of the measures they can do over such products. This can drive them to define the applicable field of this approach and this can help them to

  5. An Improved Snake Model for Refinement of Lidar-Derived Building Roof Contours Using Aerial Images

    NASA Astrophysics Data System (ADS)

    Chen, Qi; Wang, Shugen; Liu, Xiuguo

    2016-06-01

    Building roof contours are considered as very important geometric data, which have been widely applied in many fields, including but not limited to urban planning, land investigation, change detection and military reconnaissance. Currently, the demand on building contours at a finer scale (especially in urban areas) has been raised in a growing number of studies such as urban environment quality assessment, urban sprawl monitoring and urban air pollution modelling. LiDAR is known as an effective means of acquiring 3D roof points with high elevation accuracy. However, the precision of the building contour obtained from LiDAR data is restricted by its relatively low scanning resolution. With the use of the texture information from high-resolution imagery, the precision can be improved. In this study, an improved snake model is proposed to refine the initial building contours extracted from LiDAR. First, an improved snake model is constructed with the constraints of the deviation angle, image gradient, and area. Then, the nodes of the contour are moved in a certain range to find the best optimized result using greedy algorithm. Considering both precision and efficiency, the candidate shift positions of the contour nodes are constrained, and the searching strategy for the candidate nodes is explicitly designed. The experiments on three datasets indicate that the proposed method for building contour refinement is effective and feasible. The average quality index is improved from 91.66% to 93.34%. The statistics of the evaluation results for every single building demonstrated that 77.0% of the total number of contours is updated with higher quality index.

  6. Focal Plane Metrology for the LSST Camera

    SciTech Connect

    A Rasmussen, Andrew P.; Hale, Layton; Kim, Peter; Lee, Eric; Perl, Martin; Schindler, Rafe; Takacs, Peter; Thurston, Timothy; /SLAC

    2007-01-10

    Meeting the science goals for the Large Synoptic Survey Telescope (LSST) translates into a demanding set of imaging performance requirements for the optical system over a wide (3.5{sup o}) field of view. In turn, meeting those imaging requirements necessitates maintaining precise control of the focal plane surface (10 {micro}m P-V) over the entire field of view (640 mm diameter) at the operating temperature (T {approx} -100 C) and over the operational elevation angle range. We briefly describe the hierarchical design approach for the LSST Camera focal plane and the baseline design for assembling the flat focal plane at room temperature. Preliminary results of gravity load and thermal distortion calculations are provided, and early metrological verification of candidate materials under cold thermal conditions are presented. A detailed, generalized method for stitching together sparse metrology data originating from differential, non-contact metrological data acquisition spanning multiple (non-continuous) sensor surfaces making up the focal plane, is described and demonstrated. Finally, we describe some in situ alignment verification alternatives, some of which may be integrated into the camera's focal plane.

  7. Roughness Estimation from Point Clouds - A Comparison of Terrestrial Laser Scanning and Image Matching by Unmanned Aerial Vehicle Acquisitions

    NASA Astrophysics Data System (ADS)

    Rutzinger, Martin; Bremer, Magnus; Ragg, Hansjörg

    2013-04-01

    Recently, terrestrial laser scanning (TLS) and matching of images acquired by unmanned arial vehicles (UAV) are operationally used for 3D geodata acquisition in Geoscience applications. However, the two systems cover different application domains in terms of acquisition conditions and data properties i.e. accuracy and line of sight. In this study we investigate the major differences between the two platforms for terrain roughness estimation. Terrain roughness is an important input for various applications such as morphometry studies, geomorphologic mapping, and natural process modeling (e.g. rockfall, avalanche, and hydraulic modeling). Data has been collected simultaneously by TLS using an Optech ILRIS3D and a rotary UAV using an octocopter from twins.nrn for a 900 m² test site located in a riverbed in Tyrol, Austria (Judenbach, Mieming). The TLS point cloud has been acquired from three scan positions. These have been registered using iterative closest point algorithm and a target-based referencing approach. For registration geometric targets (spheres) with a diameter of 20 cm were used. These targets were measured with dGPS for absolute georeferencing. The TLS point cloud has an average point density of 19,000 pts/m², which represents a point spacing of about 5 mm. 15 images where acquired by UAV in a height of 20 m using a calibrated camera with focal length of 18.3 mm. A 3D point cloud containing RGB attributes was derived using APERO/MICMAC software, by a direct georeferencing approach based on the aircraft IMU data. The point cloud is finally co-registered with the TLS data to guarantee an optimal preparation in order to perform the analysis. The UAV point cloud has an average point density of 17,500 pts/m², which represents a point spacing of 7.5 mm. After registration and georeferencing the level of detail of roughness representation in both point clouds have been compared considering elevation differences, roughness and representation of different grain

  8. A fast and mobile system for registration of low-altitude visual and thermal aerial images using multiple small-scale UAVs

    NASA Astrophysics Data System (ADS)

    Yahyanejad, Saeed; Rinner, Bernhard

    2015-06-01

    The use of multiple small-scale UAVs to support first responders in disaster management has become popular because of their speed and low deployment costs. We exploit such UAVs to perform real-time monitoring of target areas by fusing individual images captured from heterogeneous aerial sensors. Many approaches have already been presented to register images from homogeneous sensors. These methods have demonstrated robustness against scale, rotation and illumination variations and can also cope with limited overlap among individual images. In this paper we focus on thermal and visual image registration and propose different methods to improve the quality of interspectral registration for the purpose of real-time monitoring and mobile mapping. Images captured by low-altitude UAVs represent a very challenging scenario for interspectral registration due to the strong variations in overlap, scale, rotation, point of view and structure of such scenes. Furthermore, these small-scale UAVs have limited processing and communication power. The contributions of this paper include (i) the introduction of a feature descriptor for robustly identifying corresponding regions of images in different spectrums, (ii) the registration of image mosaics, and (iii) the registration of depth maps. We evaluated the first method using a test data set consisting of 84 image pairs. In all instances our approach combined with SIFT or SURF feature-based registration was superior to the standard versions. Although we focus mainly on aerial imagery, our evaluation shows that the presented approach would also be beneficial in other scenarios such as surveillance and human detection. Furthermore, we demonstrated the advantages of the other two methods in case of multiple image pairs.

  9. Tidal Flooding and Vegetation Patterns in a Salt Marsh Tidal Creek Imaged by Low-altitude Balloon Aerial Photography

    NASA Astrophysics Data System (ADS)

    White, S. M.; Madsen, E.

    2013-12-01

    soil water content. These other factors are all directly affected by the hydroperiod, creating a complex system of feedbacks. Inundation frequencies show a pronounced relationship to zonation. Creek bank height and the hydroperiod have a curvilinear relationship at low bank heights such that small decreases in creek bank height can result in large increases in inundation frequency. Biological zonation is not simply a result of bank height and inundation frequency, other contributing factors include species competition, adaptability, and groundwater flow. Vegetation patterns delineated by a ground-based GPS survey and image classification from the aerial photos show that not all changes in eco-zonation are a direct function of elevation. Some asymmetry across the creek is observed in plant habitat, and eliminating topography (and thereby tidal inundation) as a factor, we attribute the remaining variability to groundwater flow.

  10. Thermal Imaging Using Small-Aerial Platforms for Assessment of Crop Water Stress in Humid Subtropical Climates

    Technology Transfer Automated Retrieval System (TEKTRAN)

    Leaf- or canopy-to-air temperature difference (hereafter called CATD) can provide information on crop energy status. Thermal imagery from agricultural aircraft or Unmanned Aerial Vehicles (UAVs) have the potential of providing thermal data for calculation of CATD and visual snapshots that can guide ...

  11. Integration of mask and silicon metrology in DFM

    NASA Astrophysics Data System (ADS)

    Matsuoka, Ryoichi; Mito, Hiroaki; Sugiyama, Akiyuki; Toyoda, Yasutaka

    2009-03-01

    We have developed a highly integrated method of mask and silicon metrology. The method adopts a metrology management system based on DBM (Design Based Metrology). This is the high accurate contouring created by an edge detection algorithm used in mask CD-SEM and silicon CD-SEM. We have inspected the high accuracy, stability and reproducibility in the experiments of integration. The accuracy is comparable with that of the mask and silicon CD-SEM metrology. In this report, we introduce the experimental results and the application. As shrinkage of design rule for semiconductor device advances, OPC (Optical Proximity Correction) goes aggressively dense in RET (Resolution Enhancement Technology). However, from the view point of DFM (Design for Manufacturability), the cost of data process for advanced MDP (Mask Data Preparation) and mask producing is a problem. Such trade-off between RET and mask producing is a big issue in semiconductor market especially in mask business. Seeing silicon device production process, information sharing is not completely organized between design section and production section. Design data created with OPC and MDP should be linked to process control on production. But design data and process control data are optimized independently. Thus, we provided a solution of DFM: advanced integration of mask metrology and silicon metrology. The system we propose here is composed of followings. 1) Design based recipe creation: Specify patterns on the design data for metrology. This step is fully automated since they are interfaced with hot spot coordinate information detected by various verification methods. 2) Design based image acquisition: Acquire the images of mask and silicon automatically by a recipe based on the pattern design of CD-SEM.It is a robust automated step because a wide range of design data is used for the image acquisition. 3) Contour profiling and GDS data generation: An image profiling process is applied to the acquired image based

  12. Heterodyne Interferometer Angle Metrology

    NASA Technical Reports Server (NTRS)

    Hahn, Inseob; Weilert, Mark A.; Wang, Xu; Goullioud, Renaud

    2010-01-01

    A compact, high-resolution angle measurement instrument has been developed that is based on a heterodyne interferometer. The common-path heterodyne interferometer metrology is used to measure displacements of a reflective target surface. In the interferometer setup, an optical mask is used to sample the measurement laser beam reflecting back from a target surface. Angular rotations, around two orthogonal axes in a plane perpendicular to the measurement- beam propagation direction, are determined simultaneously from the relative displacement measurement of the target surface. The device is used in a tracking telescope system where pitch and yaw measurements of a flat mirror were simultaneously performed with a sensitivity of 0.1 nrad, per second, and a measuring range of 0.15 mrad at a working distance of an order of a meter. The nonlinearity of the device is also measured less than one percent over the measurement range.

  13. Laser Metrology in the Micro-Arcsecond Metrology Testbed

    NASA Technical Reports Server (NTRS)

    An, Xin; Marx, D.; Goullioud, Renaud; Zhao, Feng

    2004-01-01

    The Space Interferometer Mission (SIM), scheduled for launch in 2009, is a space-born visible light stellar interferometer capable of micro-arcsecond-level astrometry. The Micro-Arcsecond Metrology testbed (MAM) is the ground-based testbed that incorporates all the functionalities of SIM minus the telescope, for mission-enabling technology development and verification. MAM employs a laser heterodyne metrology system using the Sub-Aperture Vertex-to-Vertex (SAVV) concept. In this paper, we describe the development and modification of the SAVV metrology launchers and the metrology instrument electronics, precision alignments and pointing control, locating cyclic error sources in the MAM testbed and methods to mitigate the cyclic errors, as well as the performance under the MAM performance metrics.

  14. Thermal Imaging of Subsurface Coal Fires by means of an Unmanned Aerial Vehicle (UAV) in the Autonomous Province Xinjiang, PRC

    NASA Astrophysics Data System (ADS)

    Vasterling, Margarete; Schloemer, Stefan; Fischer, Christian; Ehrler, Christoph

    2010-05-01

    Spontaneous combustion of coal and resulting coal fires lead to very high temperatures in the subsurface. To a large amount the heat is transferred to the surface by convective and conductive transport inducing a more or less pronounced thermal anomaly. During the past decade satellite-based infrared-imaging (ASTER, MODIS) was the method of choice for coal fire detection on a local and regional scale. However, the resolution is by far too low for a detailed analysis of single coal fires which is essential prerequisite for corrective measures (i.e. fire fighting) and calculation of carbon dioxide emission based on a complex correlation between energy release and CO2 generation. Consequently, within the framework of the Sino-German research project "Innovative Technologies for Exploration, Extinction and Monitoring of Coal Fires in Northern China", a new concept was developed and successfully tested. An unmanned aerial vehicle (UAV) was equipped with a lightweight camera for thermografic (resolution 160 by 120 pixel, dynamic range -20 to 250°C) and for visual imaging. The UAV designed as an octocopter is able to hover at GPS controlled waypoints during predefined flight missions. The application of a UAV has several advantages. Compared to point measurements on the ground the thermal imagery quickly provides the spatial distribution of the temperature anomaly with a much better resolution. Areas otherwise not accessible (due to topography, fire induced cracks, etc.) can easily be investigated. The results of areal surveys on two coal fires in Xinjiang are presented. Georeferenced thermal and visual images were mosaicked together and analyzed. UAV-born data do well compared to temperatures measured directly on the ground and cover large areas in detail. However, measuring surface temperature alone is not sufficient. Simultaneous measurements made at the surface and in roughly 15cm depth proved substantial temperature gradients in the upper soil. Thus the temperature

  15. Status and Strategy for Moisture Metrology in European Metrology Institutes

    NASA Astrophysics Data System (ADS)

    Bell, S.; Boese, N.; Bosma, R.; Buzoianu, M.; Carroll, P.; Fernicola, V.; Georgin, E.; Heinonen, M.; Kentved, A.; Melvad, C.; Nielsen, J.

    2015-08-01

    Measurement of moisture in materials presents many challenges, due to diverse measuring principles, sample interactions with atmosphere, and variation in what is measured (either water content alone or moisture including other liquids). Calibrations are variously referenced to published standard methods, primary calibration facilities, or certified reference materials, but each of these addresses limited substances and ranges of measurement. Overall, metrology infrastructure is not as fully developed or coherent for this field as it is for many other areas of measurement. In order to understand the metrology needs and to support developments, several European national metrology institutes (NMIs) have undertaken some collaborative activities. These have included a "cooperation in research" project for sharing of information, a survey of moisture capabilities at NMIs, the formulation of a strategy for moisture metrology at the NMI level, and a funded research project to develop improved metrology for the moisture field. This paper summarizes the information gathered, giving an overview of the status of moisture metrology at NMIs, and it reports a proposed strategy to improve the current situation.

  16. Metrology of IXO Mirror Segments

    NASA Technical Reports Server (NTRS)

    Chan, Kai-Wing

    2011-01-01

    For future x-ray astrophysics mission that demands optics with large throughput and excellent angular resolution, many telescope concepts build around assembling thin mirror segments in a Wolter I geometry, such as that originally proposed for the International X-ray Observatory. The arc-second resolution requirement posts unique challenges not just for fabrication, mounting but also for metrology of these mirror segments. In this paper, we shall discuss the metrology of these segments using normal incidence metrological method with interferometers and null lenses. We present results of the calibration of the metrology systems we are currently using, discuss their accuracy and address the precision in measuring near-cylindrical mirror segments and the stability of the measurements.

  17. Differential signal scatterometry overlay metrology: an accuracy investigation

    NASA Astrophysics Data System (ADS)

    Kandel, Daniel; Adel, Mike; Dinu, Berta; Golovanevsky, Boris; Izikson, Pavel; Levinski, Vladimir; Vakshtein, Irina; Leray, Philippe; Vasconi, Mauro; Salski, Bartlomiej

    2007-06-01

    The overlay control budget for the 32nm technology node will be 5.7nm according to the ITRS. The overlay metrology budget is typically 1/10 of the overlay control budget resulting in overlay metrology total measurement uncertainty (TMU) requirements of 0.57nm for the most challenging use cases of the 32nm node. The current state of the art imaging overlay metrology technology does not meet this strict requirement, and further technology development is required to bring it to this level. In this work we present results of a study of an alternative technology for overlay metrology - Differential signal scatterometry overlay (SCOL). Theoretical considerations show that overlay technology based on differential signal scatterometry has inherent advantages, which will allow it to achieve the 32nm technology node requirements and go beyond it. We present results of simulations of the expected accuracy associated with a variety of scatterometry overlay target designs. We also present our first experimental results of scatterometry overlay measurements, comparing this technology with the standard imaging overlay metrology technology. In particular, we present performance results (precision and tool induced shift) and address the issue of accuracy of scatterometry overlay. We show that with the appropriate target design and algorithms scatterometry overlay achieves the accuracy required for future technology nodes.

  18. The construction of landslides achieves by using 1969 CORONA (KH-4B) image and aerial photos- A case study of the catchment of Te-chi reservoir

    NASA Astrophysics Data System (ADS)

    Jen, Chia-Hung; Dirk, Wenske; Lin, Jiun-Chuan; Böse, Margot

    2010-05-01

    Taiwan before the construction of the Central Cross-Island Highway. The ortho-rectified CORONA image and aerial photos can be used to identify landslides and provide more information about the causes of landslides and the consequences of road construction, landform evolution and agriculture practice. The long term landslide archive can be used in the study of landscape evolution and hazard assessment. There are more than 800 landslides identified in CORONA image and 900 landslides in 1980 aerial photos, which were caused by road construction, farming practice and channel erosion.

  19. Metrological multispherical freeform artifact

    NASA Astrophysics Data System (ADS)

    Blobel, Gernot; Wiegmann, Axel; Siepmann, Jens; Schulz, Michael

    2016-07-01

    Precisely known artifacts are required to characterize the accuracy of asphere and freeform measuring instruments. To this end the best knowledge of the surface characteristics in conjunction with a low measurement uncertainty are necessary. Because this is a challenging task for typical freeform surfaces used in optical systems, the concept of "metrological" artifacts is introduced. We have developed a multispherical freeform artifact for performance tests of tactile touch probe and contact-free optical measuring systems. The measurement accuracy of the complete form and the deviation from calibrated spherical sections can thus be determined. The radius calibration of multiple spherical sections is performed with an extended radius measuring procedure by interferometry. Evaluated surface forms of different measuring methods and the radii determined can be compared to each other. In this study, a multispherical freeform specimen made of copper, with two differing radii, has been measured by two optical measuring methods, a full field measuring tilted-wave interferometer and a high accuracy cylinder coordinate measuring machine with an optical probe. The surface form measurements are evaluated and compared, and the radii determined are compared to the results of a radius measurement bench.

  20. Laser Metrology In Biomechanics

    NASA Astrophysics Data System (ADS)

    Pryputniewicz, Ryszard J.

    1983-12-01

    Modern treatment of sceletal disharmonies and malocclusions utilizes application of external forces. In order to effectively use these therapeutic forces, knowledge of three-dimensional displacements of bones with correlation to biological changes is required. In the past, this problem has been studied in a number of ways using, for example, strain gauges, brittle coatings, photoelasticity, as well as clinical observations and mathematical modeling. Becouse of their inherent limitations, these techniques did not always provide all the information necessary for development of meaningful relationships between the applied force system and the resulting biological remodeling. However, recent advances in the field of la-ser metrology allowed to overcome some of the dificulties found in the earlier methods and permitted development of new techniques for non-invasive measurements of bone motions in three-dimensional space. These laser techniques are particularly useful in biomechanics because they provide for rapid and accurate determination of displacements over the entire surface of the investigate object. In this paper, application of laser techniques for quantitative in-vivo and in-vitro measurements in biomechanics will be discussed and illustrated with representative examples.

  1. Aerial camera auto focusing system

    NASA Astrophysics Data System (ADS)

    Wang, Xuan; Lan, Gongpu; Gao, Xiaodong; Liang, Wei

    2012-10-01

    Before the aerial photographic task, the cameras focusing work should be performed at first to compensate the defocus caused by the changes of the temperature, pressure etc. A new method of aerial camera auto focusing is proposed through traditional photoelectric self-collimation combined with image processing method. Firstly, the basic principles of optical self-collimation and image processing are introduced. Secondly, the limitations of the two are illustrated and the benefits of the new method are detailed. Then the basic principle, the system composition and the implementation of this new method are presented. Finally, the data collection platform is set up reasonably and the focus evaluation function curve is draw. The results showed that: the method can be used in the Aerial camera focusing field, adapt to the aviation equipment trends of miniaturization and lightweight .This paper is helpful to the further work of accurate and automatic focusing.

  2. Guiding the Search for Surface Rupture and Paleoseismic Sites using Low-Level Aerial Surveys, Geodetic Imaging, Remote Sensing and Field Mapping (Invited)

    NASA Astrophysics Data System (ADS)

    Hudnut, K. W.; Fletcher, J. M.; Teran, O.; Gonzalez-Garcia, J. J.; Hinojosa, A.; Rockwell, T. K.; Akciz, S. O.; Leprince, S.; Fielding, E. J.; Briggs, R. W.; Crone, A. J.; Gold, R. D.; Prentice, C. S.; Stock, J.; Avouac, J.; Simons, M.; Galetzka, J. E.; Lynch, D. K.; Cowgill, E.; Oskin, M. E.; Morelan, A.; Aslaksen, M.; Sellars, J.; Woolard, J.

    2010-12-01

    The significant earthquakes of 2010 produced surficial expressions ranging from blind faulting and coastal uplift in Leogane, Haiti and Maule, Chile to surface faulting in Baja California, Mexico and Yushu, China. In Haiti and Baja California geodetic imaging methods strongly guided field reconnaissance and surface rupture mapping efforts, yet in quite different ways. In these challenging examples, InSAR, UAVSAR and optical image differencing, as well as SAR pixel tracking methods, were used to locate and quantify ground deformation and ruptures. In Baja California prominent rupture occurred in parts of the Cucapah mountains, yet along an 11 km-long stepover section, the zone of faulting was discontinuous and obscured by rockfalls. Optical image differencing helped identify surface rupture, especially through this stepover. SAR pixel tracking confirmed that rupture occurred along the newly identified Indiviso fault in Baja California, though masked by ground failure in the Colorado River Delta. Also in Baja California (and extending north of the US-MX border), a complex set of NE-SW cross-faults and N-S breaks were imaged with UAVSAR, InSAR, and aerial photography allowing the intricate pattern of faulting to be scrutinized. In Haiti, surface rupture along the inferred source fault was not observed during initial reconnaissance. This led to extensive imagery- and field-based searches for surface deformation, aided by InSAR, which revealed that surface deformation was caused primarily by off-fault blind thrusting. In Baja California, high resolution (up to 3-5 cm GSD) aerial imaging by low-altitude aerial stereo photography was then used to identify promising locations for measuring slip vectors on the fault, and to aid in mapping the surface rupture in detail (at 1:500 scale). Digital aerial photography with 0.1 m GSD by NOAA using their DSS 439 camera was rapidly reduced to orthomosaics (at 0.25 m GSD) and then used as uniform base imagery for rupture mapping. In

  3. Identification of disrupted surfaces due to military activity at the Ft. Irwin National Training Center: An aerial photograph and satellite image analysis

    SciTech Connect

    McCarthy, L.E.; Marsh, S.E.; Lee, C.

    1996-07-01

    Concern for environmental management of our natural resources is most often focused on the anthropogenic impacts placed upon these resources. Desert landscapes, in particular, are fragile environments, and minimal stresses on surficial materials can greatly increase the rate and character of erosional responses. The National Training Center, Ft. Irwin, located in the middle of the Mojave Desert, California, provides an isolated study area of intense ORV activity occurring over a 50-year period. Geomorphic surfaces, and surficial disruption from two study sites within the Ft. Irwin area were mapped from 1947, 1:28,400, and 1993 1:12,000 black and white aerial photographs. Several field checks were conducted to verify this mapping. However, mapping from black and white aerial photography relies heavily on tonal differences, patterns, and morphological criteria. Satellite imagery, sensitive to changes in mineralogy, can help improve the ability to distinguish geomorphic units in desert regions. In order to assess both the extent of disrupted surfaces and the surficial geomorphology discemable from satellite imagery, analysis was done on SPOT panchromatic and Landsat Thematic Mapper (TM) multispectral imagery acquired during the spring of 1987 and 1993. The resulting classified images provide a clear indication of the capabilities of the satellite data to aid in the delineation of disrupted geomorphic surfaces.

  4. Preliminary applications of Landsat images and aerial photography for determining land-use, geologic, and hydrologic characteristics, Yampa River basin, Colorado and Wyoming

    USGS Publications Warehouse

    Heimes, F.J.; Moore, G.K.; Steele, T.D.

    1978-01-01

    Expanded energy- and recreation-related activities in the Yampa River basin, Colorado and Wyoming, have caused a rapid increase in economic development which will result in increased demand and competition for natural resources. In planning for efficient allocation of the basin 's natural resources, Landsat images and small-scale color and color-infrared photographs were used for selected geologic, hydrologic and land-use applications within the Yampa River basin. Applications of Landsat data included: (1) regional land-use classification and mapping, (2) lineament mapping, and (3) areal snow-cover mapping. Results from the Landsat investigations indicated that: (1) Landsat land-use classification maps, at a regional level, compared favorably with areal land-use patterns that were defined from available ground information, (2) lineaments were mapped in sufficient detail using recently developed techniques for interpreting aerial photographs, (3) snow cover generally could be mapped for large areas with the exception of some densely forested areas of the basin and areas having a large percentage of winter-season cloud cover. Aerial photographs were used for estimation of turbidity for eight stream locations in the basin. Spectral reflectance values obtained by digitizing photographs were compared with measured turbidity values. Results showed strong correlations (variances explained of greater than 90 percent) between spectral reflectance obtained from color photographs and measured turbidity values. (Woodard-USGS)

  5. Metrology - Beyond the Calibration Lab

    NASA Technical Reports Server (NTRS)

    Mimbs, Scott M.

    2008-01-01

    We rely on data from measurements every day; a gas-pump, a speedometer, and a supermarket weight scale are just three examples of measurements we use to make decisions. We generally accept the data from these measurements as "valid." One reason we can accept the data is the "legal metrology" requirements established and regulated by the government in matters of commerce. The measurement data used by NASA, other government agencies, and industry can be critical to decisions which affect everything from economic viability, to mission success, to the security of the nation. Measurement data can even affect life and death decisions. Metrology requirements must adequately provide for risks associated with these decisions. To do this, metrology must be integrated into all aspects of an industry including research, design, testing, and product acceptance. Metrology, the science of measurement, has traditionally focused on the calibration of instruments, and although instrument calibration is vital, it is only a part of the process that assures quality in measurement data. For example, measurements made in research can influence the fundamental premises that establish the design parameters, which then flow down to the manufacturing processes, and eventually impact the final product. Because a breakdown can occur anywhere within this cycle, measurement quality assurance has to be integrated into every part of the life-cycle process starting with the basic research and ending with the final product inspection process. The purpose of this paper is to discuss the role of metrology in the various phases of a product's life-cycle. For simplicity, the cycle will be divided in four broad phases, with discussions centering on metrology within NASA. .

  6. Metrological Reliability of Medical Devices

    NASA Astrophysics Data System (ADS)

    Costa Monteiro, E.; Leon, L. F.

    2015-02-01

    The prominent development of health technologies of the 20th century triggered demands for metrological reliability of physiological measurements comprising physical, chemical and biological quantities, essential to ensure accurate and comparable results of clinical measurements. In the present work, aspects concerning metrological reliability in premarket and postmarket assessments of medical devices are discussed, pointing out challenges to be overcome. In addition, considering the social relevance of the biomeasurements results, Biometrological Principles to be pursued by research and innovation aimed at biomedical applications are proposed, along with the analysis of their contributions to guarantee the innovative health technologies compliance with the main ethical pillars of Bioethics.

  7. NASA metrology and calibration, 1993

    NASA Technical Reports Server (NTRS)

    1993-01-01

    Th sixteenth annual workshop of NASA's Metrology and Calibration Working Group was held April 20-22, 1993. The goals of the Working Group are to provide Agencywide standardization of individual metrology programs, where appropriate; to promote cooperation and exchange of information within NASA, with other Government agencies, and with industry; to serve as the primary Agency interface with the National Institute of Standards and Technology; and to encourage formal quality control techniques such as Measurement Assurance Programs. These proceedings contain unedited reports and presentations from the workshop and are provided for information only.

  8. Multi-temporal analysis of aerial images for the investigation of spatial-temporal dynamics of shallow erosion - a case study from the Tyrolean Alps

    NASA Astrophysics Data System (ADS)

    Wiegand, C.; Geitner, C.; Heinrich, K.; Rutzinger, M.

    2012-04-01

    Small and shallow eroded areas characterize the landscape of many pastures and meadows in the Alps. The extent of such erosion phenomena varies between 2 m2 and 200 m2. These patches tend to be only a few decimetres thick, with a maximum depth of 2 m. The processes involved are shallow landslides, superficial erosion by snow and livestock trampling. Key parameters that influence the emergence of shallow erosion are the geological, topographical and climatic circumstances in an area as well as its soils, vegetation and land use. The negative impact of this phenomenon includes not only the loss of soil but also the reduced attractiveness of the landscape, especially in tourist regions. One approach identifying and mapping geomorphological elements is remote sensing. The analysis of aerial images is a suitable method for identifying the multi-temporal dynamics of shallow eroded areas because of the good spatial and temporal resolution. For this purpose, we used a pixel-based approach to detect these areas semi-automatically in an orthophoto. In a first step, each aerial image was classified using dynamic thresholds derived from the histogram of the orthophoto. In a second step, the identified areas of erosion were filtered and visually in-terpreted. Based on this procedure, eroded areas with a minimum size of 5 m2 were detected in a test site located in the Inner Schmirn Valley (Tyrol, Austria). The altitude of the test site ranges between 1,980 m and 2,370 m, with a mean inclination of 36°, facing E to SE. Geologically, the slope is part of the "Hohe Tauern Window", characterized by "Bündner schists" deficient in lime and regolith. Until the 1960s, the slope was used as a hay meadow. Orthophotos from 2000, 2003, 2007 and 2010 were used for this investigation. Older aerial images were not suitable because of their lower resolution and poor ortho-rectification. However, they are useful for relating the results of the ten-year time-span to a larger temporal context

  9. The Kilauea 1974 Flow: Quantitative Morphometry of Lava Flows using Low Altitude Aerial Image Data using a Kite-based Platform in the Field

    NASA Astrophysics Data System (ADS)

    Scheidt, S. P.; Whelley, P.; Hamilton, C.; Bleacher, J. E.; Garry, W. B.

    2015-12-01

    The December 31, 1974 lava flow from Kilauea Caldera, Hawaii within the Hawaii Volcanoes National Park was selected for field campaigns as a terrestrial analog for Mars in support of NASA Planetary Geology and Geophysics (PGG) research and the Remote, In Situ and Synchrotron Studies for Science and Exploration (RIS4E) node of the Solar System Exploration Research Virtual Institute (SSERVI) program). The lava flow was a rapidly emplaced unit that was strongly influenced by existing topography, which favored the formation of a tributary lava flow system. The unit includes a diverse range of surface textures (e.g., pāhoehoe, ´áā, and transitional lavas), and structural features (e.g., streamlined islands, pits, and interactions with older tumuli). However, these features are generally below the threshold of visibility within previously acquired airborne and spacecraft data. In this study, we have generated unique, high-resolution digital images using low-altitude Kite Aerial Photography (KAP) system during field campaigns in 2014 and 2015 (National Park Service permit #HAVO-2012-SCI-0025). The kite-based mapping platform (nadir-viewing) and a radio-controlled gimbal (allowing pointing) provided similar data as from an unmanned aerial vehicle (UAV), but with longer flight time, larger total data volumes per sortie, and fewer regulatory challenges and cost. Images acquired from KAP and UAVs are used to create orthomosaics and DEMs using Multi-View Stereo-Photogrammetry (MVSP) software. The 3-Dimensional point clouds are extremely dense, resulting in a grid resolution of < 2 cm. Airborne Light Detection and Ranging (LiDAR) / Terrestrial Laser Scanning (TLS) data have been collected for these areas and provide a basis of comparison or "ground truth" for the photogrammetric data. Our results show a good comparison with LiDAR/TLS data, each offering their own unique advantages and potential for data fusion.

  10. An Automated Approach to Agricultural Tile Drain Detection and Extraction Utilizing High Resolution Aerial Imagery and Object-Based Image Analysis

    NASA Astrophysics Data System (ADS)

    Johansen, Richard A.

    Subsurface drainage from agricultural fields in the Maumee River watershed is suspected to adversely impact the water quality and contribute to the formation of harmful algal blooms (HABs) in Lake Erie. In early August of 2014, a HAB developed in the western Lake Erie Basin that resulted in over 400,000 people being unable to drink their tap water due to the presence of a toxin from the bloom. HAB development in Lake Erie is aided by excess nutrients from agricultural fields, which are transported through subsurface tile and enter the watershed. Compounding the issue within the Maumee watershed, the trend within the watershed has been to increase the installation of tile drains in both total extent and density. Due to the immense area of drained fields, there is a need to establish an accurate and effective technique to monitor subsurface farmland tile installations and their associated impacts. This thesis aimed at developing an automated method in order to identify subsurface tile locations from high resolution aerial imagery by applying an object-based image analysis (OBIA) approach utilizing eCognition. This process was accomplished through a set of algorithms and image filters, which segment and classify image objects by their spectral and geometric characteristics. The algorithms utilized were based on the relative location of image objects and pixels, in order to maximize the robustness and transferability of the final rule-set. These algorithms were coupled with convolution and histogram image filters to generate results for a 10km2 study area located within Clay Township in Ottawa County, Ohio. The eCognition results were compared to previously collected tile locations from an associated project that applied heads-up digitizing of aerial photography to map field tile. The heads-up digitized locations were used as a baseline for the accuracy assessment. The accuracy assessment generated a range of agreement values from 67.20% - 71.20%, and an average

  11. Hybrid metrology universal engine: co-optimization

    NASA Astrophysics Data System (ADS)

    Vaid, Alok; Osorio, Carmen; Tsai, Jamie; Bozdog, Cornel; Sendelbach, Matthew; Grubner, Eyal; Koret, Roy; Wolfling, Shay

    2014-04-01

    In recent years Hybrid Metrology has emerged as an option for enhancing the performance of existing measurement toolsets and is currently implemented in production1. Hybrid Metrology is the practice to combine measurements from multiple toolset types in order to enable or improve the measurement of one or more critical parameters. While all applications tried before were improved through standard (sequential) hybridization of data from one toolset to another, advances in device architecture, materials and processes made possible to find one case that demanded a much deeper understanding of the physical basis of measurements and simultaneous optimization of data. This paper presents the first such work using the concept of co-optimization based hybridization, where image analysis parameters of CD-SEM (critical dimensions Scanning Electron Microscope) are modulated by profile information from OCD (optical critical dimension - scatterometry) while the OCD extracted profile is concurrently optimized through addition of the CD-SEM CD results. Test vehicle utilized in this work is the 14nm technology node based FinFET High-k/Interfacial layer structure.

  12. High resolution quantum metrology via quantum interpolation

    NASA Astrophysics Data System (ADS)

    Ajoy, Ashok; Liu, Yixiang; Saha, Kasturi; Marseglia, Luca; Jaskula, Jean-Christophe; Cappellaro, Paola

    2016-05-01

    Nitrogen Vacancy (NV) centers in diamond are a promising platform for quantum metrology - in particular for nanoscale magnetic resonance imaging to determine high resolution structures of single molecules placed outside the diamond. The conventional technique for sensing of external nuclear spins involves monitoring the effects of the target nuclear spins on the NV center coherence under dynamical decoupling (the CPMG/XY8 pulse sequence). However, the nuclear spin affects the NV coherence only at precise free evolution times - and finite timing resolution set by hardware often severely limits the sensitivity and resolution of the method. In this work, we overcome this timing resolution barrier by developing a technique to supersample the metrology signal by effectively implementing a quantum interpolation of the spin system dynamics. This method will enable spin sensing at high magnetic fields and high repetition rate, allowing significant improvements in sensitivity and spectral resolution. We experimentally demonstrate a resolution boost by over a factor of 100 for spin sensing and AC magnetometry. The method is shown to be robust, versatile to sensing normal and spurious signal harmonics, and ultimately limited in resolution only by the number of pulses that can be applied.

  13. Metrology and ionospheric observation standards

    NASA Astrophysics Data System (ADS)

    Panshin, Evgeniy; Minligareev, Vladimir; Pronin, Anton

    Accuracy and ionospheric observation validity are urgent trends nowadays. WMO, URSI and national metrological and standardisation services bring forward requirements and descriptions of the ionospheric observation means. Researches in the sphere of metrological and standardisation observation moved to the next level in the Russian Federation. Fedorov Institute of Applied Geophysics (IAG) is in charge of ionospheric observation in the Russian Federation and the National Technical Committee, TC-101 , which was set up on the base of IAG- of the standardisation in the sphere. TC-101 can be the platform for initiation of the core international committee in the network of ISO The new type of the ionosounde “Parus-A” is engineered, which is up to the national requirements. “Parus-A” calibration and test were conducted by National metrological Institute (NMI) -D.I. Mendeleyev Institute for Metrology (VNIIM), signed CIMP MRA in 1991. VNIIM is a basic NMI in the sphere of Space weather (including ionospheric observations), the founder of which was celebrated chemist and metrologist Dmitriy I. Mendeleyev. Tests and calibration were carried out for the 1st time throughout 50-year-history of ionosonde exploitation in Russia. The following metrological characteristics were tested: -measurement range of radiofrequency time delay 0.5-10 ms; -time measurement inaccuracy of radio- frequency pulse ±12mcs; -frequency range of radio impulse 1-20 MHz ; -measurement inaccuracy of radio impulse carrier frequency± 5KHz. For example, the sound impulse simulator that was built-in in the ionosounde was used for measurement range of radiofrequency time delay testing. The number of standards on different levels is developed. - “Ionospheric observation guidance”; - “The Earth ionosphere. Terms and definitions”.

  14. Training set size, scale, and features in Geographic Object-Based Image Analysis of very high resolution unmanned aerial vehicle imagery

    NASA Astrophysics Data System (ADS)

    Ma, Lei; Cheng, Liang; Li, Manchun; Liu, Yongxue; Ma, Xiaoxue

    2015-04-01

    Unmanned Aerial Vehicle (UAV) has been used increasingly for natural resource applications in recent years due to their greater availability and the miniaturization of sensors. In addition, Geographic Object-Based Image Analysis (GEOBIA) has received more attention as a novel paradigm for remote sensing earth observation data. However, GEOBIA generates some new problems compared with pixel-based methods. In this study, we developed a strategy for the semi-automatic optimization of object-based classification, which involves an area-based accuracy assessment that analyzes the relationship between scale and the training set size. We found that the Overall Accuracy (OA) increased as the training set ratio (proportion of the segmented objects used for training) increased when the Segmentation Scale Parameter (SSP) was fixed. The OA increased more slowly as the training set ratio became larger and a similar rule was obtained according to the pixel-based image analysis. The OA decreased as the SSP increased when the training set ratio was fixed. Consequently, the SSP should not be too large during classification using a small training set ratio. By contrast, a large training set ratio is required if classification is performed using a high SSP. In addition, we suggest that the optimal SSP for each class has a high positive correlation with the mean area obtained by manual interpretation, which can be summarized by a linear correlation equation. We expect that these results will be applicable to UAV imagery classification to determine the optimal SSP for each class.

  15. Using enlarged stereo aerial images acquired by small-format nonmetric camera for large-scale ocean floor mapping at low tide

    NASA Astrophysics Data System (ADS)

    Adamos, Christos; Faig, Wolfgang

    1993-10-01

    HY-GRO '92 is a project currently carried out by the Ocean Mapping Group at the University of New Brunswick. One of the purposes of this project is the investigation of the relationship between acoustic mapping data and the actual ocean seabed bathymetry. In order to facilitate the comparison, ground truthing information (Digital Elevation Model) has been collected using stereo aerial photography of tidal areas at low tide. The required DEM accuracy is in the magnitude of a few centimeters. A reasonable photoscale for providing the required DEM accuracy would be 1:3750. With a focal length of 80 mm the flying height has to be 300 m. In that case the ground coverage of the 57 X 57 mm2 image format is 214 X 214 m2. It is clear that for large areas of interest (in our case: 2.5 X 2.5 km2) while maintaining the necessary overlap (60%) and sidelap (30%), the number of photographs and control points becomes unreasonably high, thus making the use of the small format camera not attractive anymore. The above encountered problem was solved with the acquisition of the original images in a four times smaller scale (1:15,000, flying height 1200 m, ground coverage 857 X 857 m2). Using a quality enlarger, the original images are enlarged by the same factor, so that the final image product is at the desired scale. The enlargement introduces effects of lens distortions and film deformations but they are again taken care of by the self calibrating bundle adjustment.

  16. Mass and heat flux balance of La Soufrière volcano (Guadeloupe) from aerial infrared thermal imaging

    NASA Astrophysics Data System (ADS)

    Gaudin, Damien; Beauducel, François; Coutant, Olivier; Delacourt, Christophe; Richon, Patrick; de Chabalier, Jean-Bernard; Hammouya, Gilbert

    2016-06-01

    La Soufrière of Guadeloupe is an active volcano of Lesser Antilles that is closely monitored due to a high eruptive hazard potential. Since 1992 it exhibits a medium-level but sustained background hydrothermal activity with low-energy and shallow seismicity, hot springs temperature increase and high flux acidic gas fumaroles at the summit. The problem of estimating the heat balance and quantifying the evolution of hydrothermal activity has become a key challenge for surveillance. This work is the first attempt of a global mapping and quantification of La Soufrière thermal activity performed in February 2010 using aerial thermal infrared imagery. After instrument calibration and data processing, we present a global map of thermal anomalies allowing to spot the main active sites: the summit area (including the fumaroles of Tarissan Pit and South Crater), the Ty Fault fumarolic zone, and the hot springs located at the vicinity of the dome. In a second step, we deduce the mass and the energy fluxes released by the volcano. In particular, we propose a simple model of energy balance to estimate the mass flux of the summit fumaroles from their brightness temperature and size. In February 2010, Tarissan Pit had a 22.8 ± 8.1 kg s -1 flux (1970 ± 704 tons day -1), while South Crater vents had a total of 19.5 ± 4.0 kg s -1 (1687 ± 348 tons day -1). Once converted into energy flux, summit fumaroles represent 98% of the 106 ± 30 MW released by the volcano, the 2% remaining being split between the hot springs and the thermal anomalies at the summit and at the Ty Fault fumarolic zone. These values are in the high range of the previous estimations, highlighting the short-term variability of the expelled fluxes. Such a heat flux requires the cooling of 1500 m 3 of magma per day, in good agreement with previous geochemical studies.

  17. High temperature Seebeck coefficient metrology

    SciTech Connect

    Martin, J.; Tritt, T.; Uher, C.

    2010-12-15

    We present an overview of the challenges and practices of thermoelectric metrology on bulk materials at high temperature (300 to 1300 K). The Seebeck coefficient, when combined with thermal and electrical conductivity, is an essential property measurement for evaluating the potential performance of novel thermoelectric materials. However, there is some question as to which measurement technique(s) provides the most accurate determination of the Seebeck coefficient at high temperature. This has led to the implementation of nonideal practices that have further complicated the confirmation of reported high ZT materials. To ensure meaningful interlaboratory comparison of data, thermoelectric measurements must be reliable, accurate, and consistent. This article will summarize and compare the relevant measurement techniques and apparatus designs required to effectively manage uncertainty, while also providing a reference resource of previous advances in high temperature thermoelectric metrology.

  18. NASA Metrology and Calibration, 1980

    NASA Technical Reports Server (NTRS)

    1981-01-01

    The proceedings of the fourth annual NASA Metrology and Calibration Workshop are presented. This workshop covered (1) review and assessment of NASA metrology and calibration activities by NASA Headquarters, (2) results of audits by the Office of Inspector General, (3) review of a proposed NASA Equipment Management System, (4) current and planned field center activities, (5) National Bureau of Standards (NBS) calibration services for NASA, (6) review of NBS's Precision Measurement and Test Equipment Project activities, (7) NASA instrument loan pool operations at two centers, (8) mobile cart calibration systems at two centers, (9) calibration intervals and decals, (10) NASA Calibration Capabilities Catalog, and (11) development of plans and objectives for FY 1981. Several papers in this proceedings are slide presentations only.

  19. Quantum resistance metrology using graphene.

    PubMed

    Janssen, T J B M; Tzalenchuk, A; Lara-Avila, S; Kubatkin, S; Fal'ko, V I

    2013-10-01

    In this paper, we review the recent extraordinary progress in the development of a new quantum standard for resistance based on graphene. We discuss the unique properties of this material system relating to resistance metrology and discuss results of the recent highest-ever precision direct comparison of the Hall resistance between graphene and traditional GaAs. We mainly focus our review on graphene expitaxially grown on SiC, a system which so far resulted in the best results. We also briefly discuss progress in the two other graphene material systems, exfoliated graphene and chemical vapour deposition graphene, and make a critical comparison with SiC graphene. Finally, we discuss other possible applications of graphene in metrology. PMID:24088373

  20. Quantum resistance metrology using graphene

    NASA Astrophysics Data System (ADS)

    Janssen, T. J. B. M.; Tzalenchuk, A.; Lara-Avila, S.; Kubatkin, S.; Fal'ko, V. I.

    2013-10-01

    In this paper, we review the recent extraordinary progress in the development of a new quantum standard for resistance based on graphene. We discuss the unique properties of this material system relating to resistance metrology and discuss results of the recent highest-ever precision direct comparison of the Hall resistance between graphene and traditional GaAs. We mainly focus our review on graphene expitaxially grown on SiC, a system which so far resulted in the best results. We also briefly discuss progress in the two other graphene material systems, exfoliated graphene and chemical vapour deposition graphene, and make a critical comparison with SiC graphene. Finally, we discuss other possible applications of graphene in metrology.

  1. Increasing the dimensions of metrology

    NASA Astrophysics Data System (ADS)

    Maurer, Wilhelm; Blaesing-Bangert, Carola; Paul, Hans-Helmut

    1990-06-01

    In any process that generates or measures pattern-placement (overlay), these parameters need to be regarded at least as two-dimensional. We show this on our procedure bringing a mask repeater under statistical process control SPC). In order to increase the accuracy of the overlay measurement process itself, plate bending has to be included as a third dimension. By taking the third dimension into account, the LMS 2000 Metrology System significantly reduces the maximum uncertainity of measurement results.

  2. Aerial radiation surveys

    SciTech Connect

    Jobst, J.

    1980-01-01

    A recent aerial radiation survey of the surroundings of the Vitro mill in Salt Lake City shows that uranium mill tailings have been removed to many locations outside their original boundary. To date, 52 remote sites have been discovered within a 100 square kilometer aerial survey perimeter surrounding the mill; 9 of these were discovered with the recent aerial survey map. Five additional sites, also discovered by aerial survey, contained uranium ore, milling equipment, or radioactive slag. Because of the success of this survey, plans are being made to extend the aerial survey program to other parts of the Salt Lake valley where diversions of Vitro tailings are also known to exist.

  3. Characterization and Metrology for Nanoelectronics

    NASA Astrophysics Data System (ADS)

    Diebold, Alain C.

    2007-09-01

    Despite the challenges associated with the cost and technological innovation, the semiconductor industry has introduced nanoelectronics into the market place. By extending traditional CMOS (complimentary metal oxide semiconductor transistors) through new materials in both the devices and on-chip interconnect, planar CMOS is already manufactured with transistor gate lengths less than 50 nm. Further extending CMOS will not only require new materials, but it may also drive the use of new non-planar device structures for transistors and new approaches for on and off-chip interconnection. At some point, CMOS extension may no longer be possible, and then a new switch would be necessary. The transition between CMOS extension and planar CMOS could involve the gradual incorporation of Beyond CMOS technology. The number of candidates continues to grow even as some possible technology is removed from consideration. Characterization and Metrology is finding each step in this transition to be a great challenge. This paper overviews the characterization and metrology necessary for both CMOS extension and beyond CMOS semiconductor technology. The International Technology Roadmap for Semiconductors is used a guide that provides a roadmap for both metrology and process technology that extends to beyond CMOS materials and devices.(1)

  4. SEM metrology for advanced lithographies

    NASA Astrophysics Data System (ADS)

    Bunday, Benjamin; Allgair, John; Rice, Bryan J.; Byers, Jeff; Avitan, Yohanan; Peltinov, Ram; Bar-zvi, Maayan; Adan, Ofer; Swyers, John; Shneck, Roni Z.

    2007-03-01

    For many years, lithographic resolution has been the main obstacle for keeping the pace of transistor densification to meet Moore's Law. The industry standard lithographic wavelength has evolved many times, from G-line to I-line, deep ultraviolet (DUV) based on KrF, and 193nm based on ArF. At each of these steps, new photoresist materials have been used. For the 45nm node and beyond, new lithography techniques are being considered, including immersion ArF lithography and extreme ultraviolet (EUV) lithography. As in the past, these techniques will use new types of photoresists with the capability of printing 45nm node (and beyond) feature widths and pitches. This paper will show results of an evaluation of the critical dimension-scanning electron microscopy (CD-SEM)-based metrology capabilities and limitations for the 193nm immersion and EUV lithography techniques that are suggested in the International Technology Roadmap for Semiconductors. In this study, we will print wafers with these emerging technologies and evaluate the performance of SEM-based metrology on these features. We will conclude with preliminary findings on the readiness of SEM metrology for these new challenges.

  5. Classification of Urban Feature from Unmanned Aerial Vehicle Images Using Gasvm Integration and Multi-Scale Segmentation

    NASA Astrophysics Data System (ADS)

    Modiri, M.; Salehabadi, A.; Mohebbi, M.; Hashemi, A. M.; Masumi, M.

    2015-12-01

    The use of UAV in the application of photogrammetry to obtain cover images and achieve the main objectives of the photogrammetric mapping has been a boom in the region. The images taken from REGGIOLO region in the province of, Italy Reggio -Emilia by UAV with non-metric camera Canon Ixus and with an average height of 139.42 meters were used to classify urban feature. Using the software provided SURE and cover images of the study area, to produce dense point cloud, DSM and Artvqvtv spatial resolution of 10 cm was prepared. DTM area using Adaptive TIN filtering algorithm was developed. NDSM area was prepared with using the difference between DSM and DTM and a separate features in the image stack. In order to extract features, using simultaneous occurrence matrix features mean, variance, homogeneity, contrast, dissimilarity, entropy, second moment, and correlation for each of the RGB band image was used Orthophoto area. Classes used to classify urban problems, including buildings, trees and tall vegetation, grass and vegetation short, paved road and is impervious surfaces. Class consists of impervious surfaces such as pavement conditions, the cement, the car, the roof is stored. In order to pixel-based classification and selection of optimal features of classification was GASVM pixel basis. In order to achieve the classification results with higher accuracy and spectral composition informations, texture, and shape conceptual image featureOrthophoto area was fencing. The segmentation of multi-scale segmentation method was used.it belonged class. Search results using the proposed classification of urban feature, suggests the suitability of this method of classification complications UAV is a city using images. The overall accuracy and kappa coefficient method proposed in this study, respectively, 47/93% and 84/91% was.

  6. Assessment of the metrological performance of an in situ storage image sensor ultra-high speed camera for full-field deformation measurements

    NASA Astrophysics Data System (ADS)

    Rossi, Marco; Pierron, Fabrice; Forquin, Pascal

    2014-02-01

    Ultra-high speed (UHS) cameras allow us to acquire images typically up to about 1 million frames s-1 for a full spatial resolution of the order of 1 Mpixel. Different technologies are available nowadays to achieve these performances, an interesting one is the so-called in situ storage image sensor architecture where the image storage is incorporated into the sensor chip. Such an architecture is all solid state and does not contain movable devices as occurs, for instance, in the rotating mirror UHS cameras. One of the disadvantages of this system is the low fill factor (around 76% in the vertical direction and 14% in the horizontal direction) since most of the space in the sensor is occupied by memory. This peculiarity introduces a series of systematic errors when the camera is used to perform full-field strain measurements. The aim of this paper is to develop an experimental procedure to thoroughly characterize the performance of such kinds of cameras in full-field deformation measurement and identify the best operative conditions which minimize the measurement errors. A series of tests was performed on a Shimadzu HPV-1 UHS camera first using uniform scenes and then grids under rigid movements. The grid method was used as full-field measurement optical technique here. From these tests, it has been possible to appropriately identify the camera behaviour and utilize this information to improve actual measurements.

  7. A new approach to stitching optical metrology data

    NASA Astrophysics Data System (ADS)

    King, Christopher W.

    The next generation of optical instruments, including telescopes and imaging apparatus, will generate an increased requirement for larger and more complex optical forms. A major limiting factor for the production of such optical components is the metrology: how do we measure such parts and with respect to what reference datum This metrology can be thought of as part of a complete cycle in the production of optical components and it is currently the most challenging aspect of production. This thesis investigates a new and complete approach to stitching optical metrology data to extend the effective aperture or, in future, the dynamic range of optical metrology instruments. A practical approach is used to build up a complete process for stitching on piano and spherical parts. The work forms a basis upon which a stitching system for aspheres might be developed in the future, which is inherently more complicated. Beginning with a historical perspective and a review of optical polishing and metrology, the work presented relates the commercially available metrology instruments to the stitching process developed. The stitching is then performed by a numerical optimization routine that seeks to join together overlapping sub-aperture measurements by consideration of the aberrations introduced by the measurement scenario, and by the overlap areas between measurements. The stitching is part of a larger project, the PPARC Optical Manipulation and Metrology project, and was to benefit from new wavefront sensing technology developed by a project partner, and to be used for the sub-aperture measurement. Difficult mathematical problems meant that such a wavefront sensor was not avail able for this work and a work-around was therefore developed using commercial instruments. The techniques developed can be adapted to work on commercial ma chine platforms, and in partuicular, the OMAM NPL/UCL swing-arm profilometer described in chapter 5, or the computer controlled polishing machines

  8. Improving automated 3D reconstruction methods via vision metrology

    NASA Astrophysics Data System (ADS)

    Toschi, Isabella; Nocerino, Erica; Hess, Mona; Menna, Fabio; Sargeant, Ben; MacDonald, Lindsay; Remondino, Fabio; Robson, Stuart

    2015-05-01

    This paper aims to provide a procedure for improving automated 3D reconstruction methods via vision metrology. The 3D reconstruction problem is generally addressed using two different approaches. On the one hand, vision metrology (VM) systems try to accurately derive 3D coordinates of few sparse object points for industrial measurement and inspection applications; on the other, recent dense image matching (DIM) algorithms are designed to produce dense point clouds for surface representations and analyses. This paper strives to demonstrate a step towards narrowing the gap between traditional VM and DIM approaches. Efforts are therefore intended to (i) test the metric performance of the automated photogrammetric 3D reconstruction procedure, (ii) enhance the accuracy of the final results and (iii) obtain statistical indicators of the quality achieved in the orientation step. VM tools are exploited to integrate their main functionalities (centroid measurement, photogrammetric network adjustment, precision assessment, etc.) into the pipeline of 3D dense reconstruction. Finally, geometric analyses and accuracy evaluations are performed on the raw output of the matching (i.e. the point clouds) by adopting a metrological approach. The latter is based on the use of known geometric shapes and quality parameters derived from VDI/VDE guidelines. Tests are carried out by imaging the calibrated Portable Metric Test Object, designed and built at University College London (UCL), UK. It allows assessment of the performance of the image orientation and matching procedures within a typical industrial scenario, characterised by poor texture and known 3D/2D shapes.

  9. Calculations and surface quality measurements of high-asymmetry angle x-ray crystal monochromators for advanced x-ray imaging and metrological applications

    NASA Astrophysics Data System (ADS)

    Zápražný, Zdenko; Korytár, Dušan; Jergel, Matej; Šiffalovič, Peter; Dobročka, Edmund; Vagovič, Patrik; Ferrari, Claudio; Mikulík, Petr; Demydenko, Maksym; Mikloška, Marek

    2015-03-01

    We present the numerical optimization and the technological development progress of x-ray optics based on asymmetric germanium crystals. We show the results of several basic calculations of diffraction properties of germanium x-ray crystal monochromators and of an analyzer-based imaging method for various asymmetry factors using an x-ray energy range from 8 to 20 keV. The important parameter of highly asymmetric monochromators as image magnifiers or compressors is the crystal surface quality. We have applied several crystal surface finishing methods, including advanced nanomachining using single-point diamond turning (SPDT), conventional mechanical lapping, chemical polishing, and chemomechanical polishing, and we have evaluated these methods by means of atomic force microscopy, diffractometry, reciprocal space mapping, and others. Our goal is to exclude the chemical etching methods as the final processing technique because it causes surface undulations. The aim is to implement very precise deterministic methods with a control of surface roughness down to 0.1 nm. The smallest roughness (˜0.3 nm), best planarity, and absence of the subsurface damage were observed for the sample which was machined using an SPDT with a feed rate of 1 mm/min and was consequently polished using a fine polishing 15-min process with a solution containing SiO2 nanoparticles (20 nm).

  10. Loschmidt echo for quantum metrology

    NASA Astrophysics Data System (ADS)

    Macrı, Tommaso; Smerzi, Augusto; Pezzè, Luca

    2016-07-01

    We propose a versatile Loschmidt echo protocol to detect and quantify multiparticle entanglement. It allows us to extract the quantum Fisher information for arbitrary pure states, and finds direct application in quantum metrology. In particular, the protocol applies to states that are generally difficult to characterize, as non-Gaussian states, and states that are not symmetric under particle exchange. We focus on atomic systems, including trapped ions, polar molecules, and Rydberg atoms, where entanglement is generated dynamically via long-range interaction, and show that the protocol is stable against experimental detection errors.

  11. Primary calibration in acoustics metrology

    NASA Astrophysics Data System (ADS)

    Bacelar Milhomem, T. A.; Defilippo Soares, Z. M.

    2015-01-01

    SI unit in acoustics is realized by the reciprocity calibrations of laboratory standard microphones in pressure field, free field and diffuse field. Calibrations in pressure field and in free field are already consolidated and the Inmetro already done them. Calibration in diffuse field is not yet consolidated, however, some national metrology institutes, including Inmetro, are conducting researches on this subject. This paper presents the reciprocity calibration, the results of Inmetro in recent key comparisons and the research that is being developed for the implementation of reciprocity calibration in diffuse field.

  12. Advanced defect and metrology solutions

    NASA Astrophysics Data System (ADS)

    Novak, Erik

    2014-05-01

    Cost, weight, performance, and lifetime requirements for precision components used throughout the aerospace and defense industries are driving innovative mechanical designs, manufacturing processes and use of new materials. In turn, these advanced components typically require tighter dimensional and surface tolerances to function as designed. Scratch testers, microscope-based systems, and other traditional metrology systems are inadequate for roughness, small-scale geometry, and defect determination on many of these parts. This talk will examine the advantages and disadvantages of some of the new technologies developed to provide more robust, versatile, and sensitive measurements of precision components for advanced manufacturing environments.

  13. Metrology Careers: Jobs for Good Measure

    ERIC Educational Resources Information Center

    Liming, Drew

    2009-01-01

    What kind of career rewards precision and accuracy? One in metrology--the science of measurement. By evaluating and calibrating the technology in people's everyday lives, metrologists keep their world running smoothly. Metrology is used in the design and production of almost everything people encounter daily, from the cell phones in their pockets…

  14. Lithography aware overlay metrology target design method

    NASA Astrophysics Data System (ADS)

    Lee, Myungjun; Smith, Mark D.; Lee, Joonseuk; Jung, Mirim; Lee, Honggoo; Kim, Youngsik; Han, Sangjun; Adel, Michael E.; Lee, Kangsan; Lee, Dohwa; Choi, Dongsub; Liu, Zephyr; Itzkovich, Tal; Levinski, Vladimir; Levy, Ady

    2016-03-01

    We present a metrology target design (MTD) framework based on co-optimizing lithography and metrology performance. The overlay metrology performance is strongly related to the target design and optimizing the target under different process variations in a high NA optical lithography tool and measurement conditions in a metrology tool becomes critical for sub-20nm nodes. The lithography performance can be quantified by device matching and printability metrics, while accuracy and precision metrics are used to quantify the metrology performance. Based on using these metrics, we demonstrate how the optimized target can improve target printability while maintaining the good metrology performance for rotated dipole illumination used for printing a sub-100nm diagonal feature in a memory active layer. The remaining challenges and the existing tradeoff between metrology and lithography performance are explored with the metrology target designer's perspective. The proposed target design framework is completely general and can be used to optimize targets for different lithography conditions. The results from our analysis are both physically sensible and in good agreement with experimental results.

  15. Draper Laboratory small autonomous aerial vehicle

    NASA Astrophysics Data System (ADS)

    DeBitetto, Paul A.; Johnson, Eric N.; Bosse, Michael C.; Trott, Christian A.

    1997-06-01

    The Charles Stark Draper Laboratory, Inc. and students from Massachusetts Institute of Technology and Boston University have cooperated to develop an autonomous aerial vehicle that won the 1996 International Aerial Robotics Competition. This paper describes the approach, system architecture and subsystem designs for the entry. This entry represents a combination of many technology areas: navigation, guidance, control, vision processing, human factors, packaging, power, real-time software, and others. The aerial vehicle, an autonomous helicopter, performs navigation and control functions using multiple sensors: differential GPS, inertial measurement unit, sonar altimeter, and a flux compass. The aerial transmits video imagery to the ground. A ground based vision processor converts the image data into target position and classification estimates. The system was designed, built, and flown in less than one year and has provided many lessons about autonomous vehicle systems, several of which are discussed. In an appendix, our current research in augmenting the navigation system with vision- based estimates is presented.

  16. Surface Slope Metrology on Deformable Soft X-ray Mirrors

    SciTech Connect

    Yuan, Sheng; Yashchuk, Valeriy V.; Goldberg, Kenneth A.; Celestre, Rich; Church, Matthew; McKinney, Wayne R.; Morrison, Greg; Warwick, Tony

    2010-01-31

    We report on the current state of surface slope metrology on deformable mirrors for soft x-rays at the Advanced Light Source (ALS). While we are developing techniques for in situ at-wavelength tuning, we are refining methods of ex situ visible-light optical metrology to achieve sub-100-nrad accuracy. This paper reports on laboratory studies, measurements and tuning of a deformable test-KB mirror prior to its use. The test mirror was bent to a much different optical configuration than its original design, achieving a 0.38 micro-radian residual slope error. Modeling shows that in some cases, by including the image conjugate distance as an additional free parameter in the alignment, along with the two force couples, fourth-order tangential shape errors (the so-called bird shape) can be reduced or eliminated.

  17. Surface Slope Metrology on Deformable Soft X-ray Mirrors

    SciTech Connect

    Yuan, S.; Yashchuk, V.V.; Goldberg, K.A.; Celestre, R.; Church, M.; McKinney, W.R.; Morrison, G.; Warwick, T.

    2009-09-18

    We report on the current state of surface slope metrology on deformable mirrors for soft x-rays at the Advanced Light Source (ALS). While we are developing techniques for in situ at-wavelength tuning, we are refining methods of ex situvisible-light optical metrology to achieve sub-100-nrad accuracy. This paper reports on laboratory studies, measurements and tuning of a deformable test-KB mirror prior to its use. The test mirror was bent to a much different optical configuration than its original design, achieving a 0.38 micro-radian residual slope error. Modeling shows that in some cases, by including the image conjugate distance as an additional free parameter in the alignment, along with the two force couples, fourth-order tangential shape errors (the so-called bird shape) can be reduced or eliminated.

  18. X-ray microscope assemblies. Final report and metrology report

    SciTech Connect

    Zehnpfennig, T.F.

    1981-04-13

    This is the Final Report and Metrology Report prepared under Lawrence Livermore Laboratory Subcontract 9936205, X-ray Microscope Assemblies. The purpose of this program was to design, fabricate, and perform detailed metrology on an axisymmetric grazing-incidence x-ray microscope (XRMS) to be used as a diagnostic instrument in the Lawrence Livermore Laser Fusion Program. The optical configuration chosen for this device consists of two internally polished surfaces of revolution: an hyperboloid facing the object; and a confocal, co-axial elliposid facing the image. This arrangement is known as the Wolter Type-I configuration. The grazing angle of reflection for both surfaces is approximately 1/sup 0/. The general optical performance goals under this program were to achieve a spatial resolution in the object plane in the soft x-ray region of approximately 1 micron, and to achieve an effective solid collecting angle which is an appreciable fraction of the geometric solid collecting angle.

  19. Low-cost, quantitative assessment of highway bridges through the use of unmanned aerial vehicles

    NASA Astrophysics Data System (ADS)

    Ellenberg, Andrew; Kontsos, Antonios; Moon, Franklin; Bartoli, Ivan

    2016-04-01

    Many envision that in the near future the application of Unmanned Aerial Vehicles (UAVs) will impact the civil engineering industry. Use of UAVs is currently experiencing tremendous growth, primarily in military and homeland security applications. It is only a matter of time until UAVs will be widely accepted as platforms for implementing monitoring/surveillance and inspection in other fields. Most UAVs already have payloads as well as hardware/software capabilities to incorporate a number of non-contact remote sensors, such as high resolution cameras, multi-spectral imaging systems, and laser ranging systems (LIDARs). Of critical importance to realizing the potential of UAVs within the infrastructure realm is to establish how (and the extent to which) such information may be used to inform preservation and renewal decisions. Achieving this will depend both on our ability to quantify information from images (through, for example, optical metrology techniques) and to fuse data from the array of non-contact sensing systems. Through a series of applications to both laboratory-scale and field implementations on operating infrastructure, this paper will present and evaluate (through comparison with conventional approaches) various image processing and data fusion strategies tailored specifically for the assessment of highway bridges. Example scenarios that guided this study include the assessment of delaminations within reinforced concrete bridge decks, the quantification of the deterioration of steel coatings, assessment of the functionality of movement mechanisms, and the estimation of live load responses (inclusive of both strain and displacement).

  20. Small Whiskbroom Imager for atmospheric compositioN monitorinG (SWING) from an Unmanned Aerial Vehicle (UAV): Results from the 2014 AROMAT campaign

    NASA Astrophysics Data System (ADS)

    Merlaud, Alexis; Tack, Frederik; Constantin, Daniel; Fayt, Caroline; Maes, Jeroen; Mingireanu, Florin; Mocanu, Ionut; Georgescu, Lucian; Van Roozendael, Michel

    2015-04-01

    The Small Whiskbroom Imager for atmospheric compositioN monitorinG (SWING) is an instrument dedicated to atmospheric trace gas retrieval from an Unmanned Aerial Vehicle (UAV). The payload is based on a compact visible spectrometer and a scanning mirror to collect scattered sunlight. Its weight, size, and power consumption are respectively 920 g, 27x12x12 cm3, and 6 W. The custom-built 2.5 m flying wing UAV is electrically powered, has a typical airspeed of 100 km/h, and can operate at a maximum altitude of 3 km. Both the payload and the UAV were developed in the framework of a collaboration between the Belgian Institute for Space Aeronomy (BIRA-IASB) and the Dunarea de Jos University of Galati, Romania. We present here SWING-UAV test flights dedicated to NO2 measurements and performed in Romania on 10 and 11 September 2014, during the Airborne ROmanian Measurements of Aerosols and Trace gases (AROMAT) campaign. The UAV performed 5 flights in the vicinity of the large thermal power station of Turceni (44.67° N, 23.4° E). The UAV was operated in visual range during the campaign, up to 900 m AGL , downwind of the plant and crossing its exhaust plume. The spectra recorded on flight are analyzed with the Differential Optical Absorption Spectroscopy (DOAS) method. The retrieved NO2 Differential Slant Column Densities (DSCDs) are up to 1.5e17 molec/cm2 and reveal the horizontal gradients around the plant. The DSCDs are converted to vertical columns and compared with coincident car-based DOAS measurements. We also present the near-future perspective of the SWING-UAV observation system, which includes flights in 2015 above the Black Sea to quantify ship emissions, the addition of SO2 as a target species, and autopilot flights at higher altitudes to cover a typical satellite pixel extent (10x10 km2).

  1. Hyperspatial Thermal Imaging of Surface Hydrothermal Features at Pilgrim Hot Springs, Alaska using a small Unmanned Aerial System (sUAS)

    NASA Astrophysics Data System (ADS)

    Haselwimmer, C. E.; Wilson, R.; Upton, C.; Prakash, A.; Holdmann, G.; Walker, G.

    2013-12-01

    Thermal remote sensing provides a valuable tool for mapping and monitoring surface hydrothermal features associated with geothermal activity. The increasing availability of low-cost, small Unmanned Aerial Systems (sUAS) with integrated thermal imaging sensors offers a means to undertake very high spatial resolution (hyperspatial), quantitative thermal remote sensing of surface geothermal features in support of exploration and long-term monitoring efforts. Results from the deployment of a quadcopter sUAS equipped with a thermal camera over Pilgrim Hot Springs, Alaska for detailed mapping and heat flux estimation for hot springs, seeps, and thermal pools are presented. Hyperspatial thermal infrared imagery (4 cm pixels) was acquired over Pilgrim Hot Springs in July 2013 using a FLIR TAU 640 camera operating from an Aeryon Scout sUAS flying at an altitude of 40m. The registered and mosaicked thermal imagery is calibrated to surface temperature values using in-situ measurements of uniform blackbody tarps and the temperatures of geothermal and other surface pools acquired with a series of water temperature loggers. Interpretation of the pre-processed thermal imagery enables the delineation of hot springs, the extents of thermal pools, and the flow and mixing of individual geothermal outflow plumes with an unprecedented level of detail. Using the surface temperatures of thermal waters derived from the FLIR data and measured in-situ meteorological parameters the hot spring heat flux and outflow rate is calculated using a heat budget model for a subset of the thermal drainage. The heat flux/outflow rate estimates derived from the FLIR data are compared against in-situ measurements of the hot spring outflow rate recorded at the time of the thermal survey.

  2. Small Whiskbroom Imager for atmospheric compositioN monitorinG (SWING) from an Unmanned Aerial Vehicle (UAV): status and perspectives

    NASA Astrophysics Data System (ADS)

    Merlaud, Alexis; Tack, Frederik; Constantin, Daniel-Eduard; Fayt, Caroline; Maes, Jeroen; Mingireanu, Florin; Mocanu, Ionut; Georgescu, Lucian; Van Roozendael, Michel

    2014-05-01

    The Small Whiskbroom Imager for atmospheric compositioN monitorinG (SWING) is a recently developed instrument dedicated to trace gas measurements from Unmanned Aerial Vehicles (UAVs). The payload is based on a compact ultra-violet visible spectrometer and a scanning mirror. Its weight, size, and power consumption are respectively 920 g, 27x12x12 cm3, and 6 W. The custom-built UAV is an electrically powered flying wing and can reach an altitude of 3 km at a mean airspeed of 100 km/h. The whole flight can be preprogrammed and controlled by an autopilot. The spectra are analyzed using Differential Optical Absorption Spectroscopy (DOAS). One major objective is the mapping of NO2 columns at high spatial resolution allowing to subsample satellite measurements within the extent of a typical ground pixel. We present the preliminary results of two test flights of the SWING-UAV observation system in the vicinity of Galati, Romania (45.45°N, 28.05°E), performed on 11 May 2013 and 20 September 2013. Several atmospheric species are identified in the spectral range covered by the spectrometer (300-600 nm): NO2, water vapor, O4, and O3. From the measurements, the detection limit for NO2 is estimated to lie around 2 ppb. We investigate: (1) the georeferencing issues and the effective spatial resolution achievable with SWING-UAV from the instantaneous field of view and the plane dynamics (2) the main parameters influencing the air mass factors, and (3) the reproducibility of NO2 measurements over the same area during the second flight which included repeated transects. We also present the near-future (2014-2015) campaigns planned for the SWING-UAV observation system.

  3. Aerial photographic reproductions

    USGS Publications Warehouse

    U.S. Geological Survey

    1975-01-01

    The National Cartographic Information Center of the U.S. Geological Survey maintains records of aerial photographic coverage of the United States and its Territories, based on reports from other Federal agencies as well as State governmental agencies and commercial companies. From these records, the Center furnishes data to prospective purchasers on available photography and the agency holding the aerial film.

  4. SEM simulation for 2D and 3D inspection metrology and defect review

    NASA Astrophysics Data System (ADS)

    Levi, Shimon; Schwartsband, Ishai; Khristo, Sergey; Ivanchenko, Yan; Adan, Ofer

    2014-03-01

    Advanced SEM simulation has become a key element in the ability of SEM inspection, metrology and defect review to meet the challenges of advanced technologies. It grants additional capabilities to the end user, such as 3D height measurements, accurate virtual metrology, and supports Design Based Metrology to bridge the gap between design layout and SEM image. In this paper we present SEM simulations capabilities, which take into consideration all parts of the SEM physical and electronic path, interaction between Electron beam and material, multi perspective SEM imaging and shadowing derived from proximity effects caused by the interaction of the Secondary Electrons signal with neighboring pattern edges. Optimizing trade-off between simulation accuracy, calibration procedures and computational complexity, the simulation is running in real-time with minimum impact on throughput. Experiment results demonstrate Height measurement capacities, and CAD based simulated pattern is compared with SEM image to evaluate simulated pattern fidelity.

  5. Quantitative extraction of bedrock exposed rate based on unmanned aerial vehicle data and TM image in Karst Environment

    NASA Astrophysics Data System (ADS)

    wang, hongyan; li, qiangzi; du, xin; zhao, longcai

    2016-04-01

    In the karst regions of Southwest China, rocky desertification is one of the most serious problems of land degradation. The bedrock exposed rate is one of the important indexes to assess the degree of rocky desertification in the karst regions. Because of the inherent merits of macro scale, frequency, efficiency and synthesis, remote sensing is the promising method to monitor and assess karst rocky desertification on large scale. However, the actual measurement of bedrock exposed rate is difficult and existing remote sensing methods cannot directly be exploited to extract the bedrock exposed rate owing to the high complexity and heterogeneity of karst environments. Therefore, based on the UAV and TM data, the paper selected Xingren County as the research area, and the quantitative extraction of the bedrock exposed rate based on the multi scale remote sensing data was developed. Firstly, we used the object oriented method to carry out the accurate classification of UAV image and based on the results of rock extraction, the bedrock exposed rate was calculated in the 30m grid scale. Parts of the calculated samples were as training data and another samples were as the model validation data. Secondly, in each grid the band reflectivity of TM data was extracted and we also calculated a variety of rock index and vegetation index (NDVI, SAVI etc.). Finally, the network model was established to extract the bedrock exposed rate, the correlation coefficient (R) of the network model was 0.855 and the correlation coefficient (R) of the validation model was 0.677, the root mean square error (RMSE) was 0.073. Based on the quantitative inversion model, the distribution map of the bedrock exposed rate in Xingren County was obtained. Keywords: Bedrock exposed rate, quantitative extraction, UAV and TM data, Karst rocky desertification.

  6. A European Roadmap for Thermophysical Properties Metrology

    NASA Astrophysics Data System (ADS)

    Filtz, J.-R.; Wu, J.; Stacey, C.; Hollandt, J.; Monte, C.; Hay, B.; Hameury, J.; Villamañan, M. A.; Thurzo-Andras, E.; Sarge, S.

    2015-03-01

    A roadmap for thermophysical properties metrology was developed in spring 2011 by the Thermophysical Properties Working Group in the EURAMET Technical Committee in charge of Thermometry, Humidity and Moisture, and Thermophysical Properties metrology. This roadmapping process is part of the EURAMET (European Association of National Metrology Institutes) activities aiming to increase impact from national investment in European metrology R&D. The roadmap shows a shared vision of how the development of thermophysical properties metrology should be oriented over the next 15 years to meet future social and economic needs. Since thermophysical properties metrology is a very broad and varied field, the authors have limited this roadmap to the following families of properties: thermal transport properties (thermal conductivity, thermal diffusivity, etc.), radiative properties (emissivity, absorbance, reflectance, and transmittance), caloric quantities (specific heat, enthalpy, etc.), thermodynamic properties (PVT and phase equilibria properties), and temperature-dependent quantities (thermal expansion, compressibility, etc.). This roadmap identifies the main societal and economical triggers that drive developments in thermophysical properties metrology. The key topics considered are energy, environment, advanced manufacturing and processing, public safety, security, and health. Key targets that require improved thermophysical properties measurements are identified in order to address these triggers. Ways are also proposed for defining the necessary skills and the main useful means to be implemented. These proposals will have to be revised as needs and technologies evolve in the future.

  7. MSFC Optical Metrology: A National Resource

    NASA Technical Reports Server (NTRS)

    Burdine, Robert

    1998-01-01

    A national need exists for Large Diameter Optical Metrology Services. These services include the manufacture, testing, and assurance of precision and control necessary to assure the success of large optical projects. "Best Practices" are often relied on for manufacture and quality controls while optical projects are increasingly more demanding and complex. Marshall Space Flight Center (MSFC) has acquired unique optical measurement, testing and metrology capabilities through active participation in a wide variety of NASA optical programs. An overview of existing optical facilities and metrology capabilities is given with emphasis on use by other optical projects. Cost avoidance and project success is stressed through use of existing MSFC facilities and capabilities for measurement and metrology controls. Current issues in large diameter optical metrology are briefly reviewed. The need for a consistent and long duration Large Diameter Optical Metrology Service Group is presented with emphasis on the establishment of a National Large Diameter Optical Standards Laboratory. Proposals are made to develop MSFC optical standards and metrology capabilities as the primary national standards resource, providing access to MSFC Optical Core Competencies for manufacturers and researchers. Plans are presented for the development of a national lending library of precision optical standards with emphasis on cost avoidance while improving measurement assurance.

  8. Future metrology needs for FEL reflective optics.

    SciTech Connect

    Assoufid, L.

    2000-09-21

    An International Workshop on Metrology for X-ray and Neutron Optics has been held March 16-17, 2000, at the Advanced Photon Source, Argonne National Laboratory, near Chicago, Illinois (USA). The workshop gathered engineers and scientists from both the U.S. and around the world to evaluate metrology instrumentation and methods used to characterize surface figure and finish for long grazing incidence optics used in beamlines at synchrotrons radiation sources. This two-day workshop was motivated by the rapid evolution in the performance of x-ray and neutron sources along with requirements in optics figure and finish. More specifically, the performance of future light sources, such as free-electron laser (FEL)-based x-ray sources, is being pushed to new limits in term of both brilliance and coherence. As a consequence, tolerances on surface figure and finish of the next generation of optics are expected to become tighter. The timing of the workshop provided an excellent opportunity to study the problem, evaluate the state of the art in metrology instrumentation, and stimulate innovation on future metrology instruments and techniques to be used to characterize these optics. This paper focuses on FEL optics and metrology needs. (A more comprehensive summary of the workshop can be found elsewhere.) The performance and limitations of current metrology instrumentation will be discussed and recommendations from the workshop on future metrology development to meet the FEL challenges will be detailed.

  9. Swept Frequency Laser Metrology System

    NASA Technical Reports Server (NTRS)

    Zhao, Feng (Inventor)

    2010-01-01

    A swept frequency laser ranging system having sub-micron accuracy that employs multiple common-path heterodyne interferometers, one coupled to a calibrated delay-line for use as an absolute reference for the ranging system. An exemplary embodiment uses two laser heterodyne interferometers to create two laser beams at two different frequencies to measure distance and motions of target(s). Heterodyne fringes generated from reflections off a reference fiducial X(sub R) and measurement (or target) fiducial X(sub M) are reflected back and are then detected by photodiodes. The measured phase changes Delta phi(sub R) and Delta phi (sub m) resulting from the laser frequency swept gives target position. The reference delay-line is the only absolute reference needed in the metrology system and this provides an ultra-stable reference and simple/economical system.

  10. Low cost capacimeter, metrological analysis

    NASA Astrophysics Data System (ADS)

    Kramar, M. G.; Souza, R. U.; Machado, V.

    2016-07-01

    Daily, for electronic professionals, a common need is to measure a capacitance from a capacitor. Often this measurement requires expensive equipments, not portables. This paper describes the development of an electronic circuit capable of measuring capacitance within the range of 100 nF up to 1 mF, providing a reliable and affordable system. Measures had been taken and metrological analyzes were performed on the experimental data. Also, the system theoretical model was evaluated in order to compare the behavior of both: practical and modeled system, investigating the availability of further improvements. A functional circuit with uncertainties compatible to those, provided for the theoretical model was developed. The developed system proved to be accurate, inexpensive and suitable for portable measurements.

  11. Metrology for Fuel Cell Manufacturing

    SciTech Connect

    Stocker, Michael; Stanfield, Eric

    2015-02-04

    The project was divided into three subprojects. The first subproject is Fuel Cell Manufacturing Variability and Its Impact on Performance. The objective was to determine if flow field channel dimensional variability has an impact on fuel cell performance. The second subproject is Non-contact Sensor Evaluation for Bipolar Plate Manufacturing Process Control and Smart Assembly of Fuel Cell Stacks. The objective was to enable cost reduction in the manufacture of fuel cell plates by providing a rapid non-contact measurement system for in-line process control. The third subproject is Optical Scatterfield Metrology for Online Catalyst Coating Inspection of PEM Soft Goods. The objective was to evaluate the suitability of Optical Scatterfield Microscopy as a viable measurement tool for in situ process control of catalyst coatings.

  12. Metrological aspects of enzyme production

    NASA Astrophysics Data System (ADS)

    Kerber, T. M.; Dellamora-Ortiz, G. M.; Pereira-Meirelles, F. V.

    2010-05-01

    Enzymes are frequently used in biotechnology to carry out specific biological reactions, either in industrial processes or for the production of bioproducts and drugs. Microbial lipases are an important group of biotechnologically valuable enzymes that present widely diversified applications. Lipase production by microorganisms is described in several published papers; however, none of them refer to metrological evaluation and the estimation of the uncertainty in measurement. Moreover, few of them refer to process optimization through experimental design. The objectives of this work were to enhance lipase production in shaken-flasks with Yarrowia lipolytica cells employing experimental design and to evaluate the uncertainty in measurement of lipase activity. The highest lipolytic activity obtained was about three- and fivefold higher than the reported activities of CRMs BCR-693 and BCR-694, respectively. Lipase production by Y. lipolytica cells aiming the classification as certified reference material is recommended after further purification and stability studies.

  13. Quantum Error Correction for Metrology

    NASA Astrophysics Data System (ADS)

    Sushkov, Alex; Kessler, Eric; Lovchinsky, Igor; Lukin, Mikhail

    2014-05-01

    The question of the best achievable sensitivity in a quantum measurement is of great experimental relevance, and has seen a lot of attention in recent years. Recent studies [e.g., Nat. Phys. 7, 406 (2011), Nat. Comms. 3, 1063 (2012)] suggest that in most generic scenarios any potential quantum gain (e.g. through the use of entangled states) vanishes in the presence of environmental noise. To overcome these limitations, we propose and analyze a new approach to improve quantum metrology based on quantum error correction (QEC). We identify the conditions under which QEC allows one to improve the signal-to-noise ratio in quantum-limited measurements, and we demonstrate that it enables, in certain situations, Heisenberg-limited sensitivity. We discuss specific applications to nanoscale sensing using nitrogen-vacancy centers in diamond in which QEC can significantly improve the measurement sensitivity and bandwidth under realistic experimental conditions.

  14. A laser scanning system for metrology and viewing in ITER

    SciTech Connect

    Spampinato, P.T.; Barry, R.E.; Menon, M.M.; Herndon, J.N.; Dagher, M.A.; Maslakowski, J.E.

    1996-05-01

    The construction and operation of a next-generation fusion reactor will require metrology to achieve and verify precise alignment of plasma-facing components and inspection in the reactor vessel. The system must be compatible with the vessel environment of high gamma radiation (10{sup 4} Gy/h), ultra-high-vacuum (10{sup {minus}8} torr), and elevated temperature (200 C). The high radiation requires that the system be remotely deployed. A coherent frequency modulated laser radar-based system will be integrated with a remotely operated deployment mechanism to meet these requirements. The metrology/viewing system consists of a compact laser transceiver optics module which is linked through fiber optics to the laser source and imaging units that are located outside of a biological shield. The deployment mechanism will be a mast-like positioning system. Radiation-damage tests will be conducted on critical sensor components at Oak Ridge National Laboratory to determine threshold damage levels and effects on data transmission. This paper identifies the requirements for International Thermonuclear Experimental Reactor metrology and viewing and describes a remotely operated precision ranging and surface mapping system.

  15. A Remotely Deployed Laser System for Viewing/Metrology

    SciTech Connect

    Barry, R.E.; Herndon, J.N.; Menon, M.M.; Spampinato, P.T.

    1999-04-25

    A metrology system is being developed for in-vessel inspection of present day experimental, and next generation fusion reactors. It requires accurate measuring capability to verify sub-millimeter alignment of plasma-facing components in the reactor vessel. A metrology system capable of achieving such accuracy for next generation reactors must be compatible with the vessel environment of high gamma radiation, high vacuum, elevated temperature, and magnetic field. This environment requires that the system must be remotely deployed. A coherent, frequency modulated laser radar system that is capable of correcting for environmental vibration meets these requirements. The metrologyhiewing system consists of a compact laser transceiver optics module which is linked through fiber optics to the laser source and imaging units, that are located outside of the harsh environment. The deployment mechanism configured for a next generation reactor was telescopic-mast positioning system. This paper identifies the requirements for the metrology/viewing system having precision ranging and surface mapping capability, and discusses the results of various environmental tests.

  16. Remote laboratory for digital holographic metrology

    NASA Astrophysics Data System (ADS)

    Wilke, Marc; Alekseenko, Igor; Situ, Guohai; Sarker, Konica; Riedel, Margarita; Pedrini, Giancarlo; Osten, Wolfgang

    2011-05-01

    Advances in information technology open up the potential of combining optical systems with net based infrastructures, allowing for remote inspection and virtual metrology. In this paper, we report our recent work on building a remote laboratory for digital holographic metrology. We describe the architecture and the techniques involved in setting up the remote controlling metrology system. Further consideration will be given to the integration into an advanced infrastructure for remote experimentation, data storage and publication. Some other important issues such as information security will not be addressed.

  17. Metrology in Pharmaceutical Industry - A Case Study

    NASA Astrophysics Data System (ADS)

    Yuvamoto, Priscila D.; Fermam, Ricardo K. S.; Nascimento, Elizabeth S.

    2016-07-01

    Metrology is recognized by improving production process, increasing the productivity, giving more reliability to the measurements and consequently, it impacts in the economy of a country. Pharmaceutical area developed GMP (Good Manufacture Practice) requeriments, with no introduction of metrological concepts. However, due to Nanomedicines, it is expected this approach and the consequent positive results. The aim of this work is to verify the level of metrology implementation in a Brazilian pharmaceutical industry, using a case study. The purpose is a better mutual comprehension by both areas, acting together and governmental support to robustness of Brazilian pharmaceutical area.

  18. National Needs for Appearance Metrology

    NASA Astrophysics Data System (ADS)

    Nadal, Maria E.

    2003-04-01

    Appearance greatly influences a customer's judgement of the quality and acceptability of manufactured products, as yearly there is approximately $700 billion worth of shipped goods for which overall appearance is critical to their sale. For example, appearance is reported to be a major factor in about half of automobile purchases. The appearance of an object is the result of a complex interaction of the light field incident upon the object, the scattering and absorption properties of the object, and human perception. The measurable attributes of appearance are divided into color (hue, saturation, and lightness) and geometry (gloss, haze). The nature of the global economy has increased international competition and the need to improve the quality of many manufactured products. Since the manufacturing and marketing of these products is international in scope, the lack of national appearance standard artifacts and measurement protocols results in a direct loss to the supplier. One of the primary missions of the National Institute of Standards and Technology (NIST) is to strengthen the U.S. economy by working with industry to develop and apply technology, measurements and standards. The NIST Physics Laboratory has established an appearance metrology laboratory. This new laboratory provides calibration services for 0^o/45^o color standards and 20^o°, 60^o°, and 85^o° specular gloss, and research in the colorimetric characterization of gonioapparent including a new Standard Reference Material for metallic coatings (SRM 2017) and measurement protocols for pearlescent coatings. These services are NIST's first appearance metrology efforts in many years; a response to needs articulated by industry. These services are designed to meet demands for improved measurements and standards to enhance the acceptability of final products since appearance often plays a major role in their acceptability.

  19. Spacetime Metrology with LISA Pathfinder

    NASA Astrophysics Data System (ADS)

    Congedo, Giuseppe

    2012-04-01

    LISA is the proposed ESA-NASA gravitational wave detector in the 0.1 mHz - 0.1 Hz band. LISA Pathfinder is the down-scaled version of a single LISA arm. The arm - named Doppler link - can be treated as a differential accelerometer, measuring the relative acceleration between test masses. LISA Pathfinder - the in-flight test of the LISA instrumentation - is currently in the final implementation and planned to be launched in 2014. It will set stringent constraints on the ability to put test masses in geodesic motion to within the required differential acceleration of 3times10^{-14} m s^{-2} Hz^{-1/2} and track their relative motion to within the required differential displacement measurement noise of 9times10^{-12} m Hz^{-1/2}, around 1 mHz. Given the scientific objectives, it will carry out - for the first time with such high accuracy required for gravitational wave detection - the science of spacetime metrology, in which the Doppler link between two free-falling test masses measures the curvature. This thesis contains a novel approach to the calculation of the Doppler response to gravitational waves. It shows that the parallel transport of 4-vectors records the history of gravitational wave signals. In practice, the Doppler link is implemented with 4 bodies in LISA and 3 bodies in LISA Pathfinder. To compensate for noise sources a control logic is implemented during the measurement. The closed-loop dynamics of LISA Pathfinder can be condensed into operators acting on the motion coordinates, handling the couplings, as well as the cross-talks. The scope of system identification is the optimal calibration of the instrument. This thesis describes some data analysis procedures applied to synthetic experiments and shows the relevance of system identification for the success of LISA Pathfinder in demonstrating the principles of spacetime metrology for all future space-based missions.

  20. Monitoring and Assuring the Quality of Digital Aerial Data

    NASA Technical Reports Server (NTRS)

    Christopherson, Jon

    2007-01-01

    This viewgraph presentation explains the USGS plan for monitoring and assuring the quality of digital aerial data. The contents include: 1) History of USGS Aerial Imaging Involvement; 2) USGS Research and Results; 3) Outline of USGS Quality Assurance Plan; 4) Other areas of Interest; and 5) Summary

  1. Kite Aerial Photography (KAP) as a Tool for Field Teaching

    ERIC Educational Resources Information Center

    Sander, Lasse

    2014-01-01

    Kite aerial photography (KAP) is proposed as a creative tool for geography field teaching and as a medium to approach the complexity of readily available geodata. The method can be integrated as field experiment, surveying technique or group activity. The acquired aerial images can instantaneously be integrated in geographic information systems…

  2. Metrology, applications and methods with high energy CT systems

    SciTech Connect

    Uhlmann, N.; Voland, V.; Salamon, M.; Hebele, S.; Boehnel, M.; Reims, N.; Schmitt, M.; Kasperl, S.

    2014-02-18

    The increase of Computed Tomography (CT) as an applicable metrology and Non Destructive Testing (NDT) method raises interest on developing the application fields to larger objects, which were rarely used in the past due to their requirements on the imaging system. Especially the classical X-ray generation techniques based on standard equipment restricted the applications of CT to typical material penetration lengths of only a few cm of steel. Even with accelerator technology that offers a suitable way to overcome these restrictions just the 2D radioscopy technique found a widespread application. Beside the production and detection of photons in the MeV range itself, the achievable image quality is limited using standard detectors due to the dominating absorption effect of Compton Scattering at high energies. Especially for CT reconstruction purposes these effects have to be considered on the development path from 2D to 3D imaging. Most High Energy CT applications are therefore based on line detectors shielding scattered radiation to a maximum with an increase in imaging quality but with time consuming large volume scan capabilities. In this contribution we present the High-Energy X-ray Imaging project at the Fraunhofer Development Centre for X-ray Technology with the characterization and the potential of the CT-system according to metrological and other application capabilities.

  3. Mask CD uniformity metrology for logic patterning and its correlation to wafer data

    NASA Astrophysics Data System (ADS)

    Le Gratiet, Bertrand; Zékri, Raphaël.; Sundermann, Frank; Trautzsch, Thomas; Thaler, Thomas; Birkner, Robert; Buttgereit, Ute

    2012-06-01

    With the next technology nodes 193nm lithography is pushed to its utmost limits. The industry is forced to print at low k1 factor which goes along with a high MEEF. Additionally, new blank materials are being introduced for smaller nodes. From 4x node and beyond, global CD uniformity on wafer is getting more critical and becomes key factor to ensure a high yield in chip production. Advanced process control is required and correction strategies are applied to maintain tight wafer CD uniformity. Beside other parameters, like scanner and etch process, mask CD uniformity is one main contributor to the intra-field CD on wafer. To enable effective CDU correction strategies it is necessary to establish a mask CD uniformity metrology which shows a good correlation to wafer prints. Especially for logic pattern mask uniformity measurements to control intra-field CD uniformity becomes challenging. In this paper we will focus on mask CD uniformity measurement for logic application utilizing WLCD, which is based on aerial image technology. We will investigate 40nm node and 28nm node gate masks using 6% MoSi phase shifting mask and MoSi binary mask respectively. Furthermore, we will correlate the mask CD uniformity data to wafer data to evaluate the capability of WLCD to predict the intra-field wafer CD uniformity correctly in order to support feedforward correction strategies. We will show that WLCD shows an excellent correlation to wafer data. Additionally, we will provide an outlook on logic contact-hole masks showing first CD uniformity data and wafer correlation data.

  4. Improving wafer level CD uniformity for logic applications utilizing mask level metrology and process

    NASA Astrophysics Data System (ADS)

    Cohen, Avi; Trautzsch, Thomas; Buttgereit, Ute; Graitzer, Erez; Hanuka, Ori

    2013-09-01

    Critical Dimension Uniformity (CDU) is one of the key parameters necessary to assure good performance and reliable functionality of any integrated circuit (IC). The extension of 193nm based lithography usage combined with design rule shrinkage makes process control, in particular the wafer level CDU control, an extremely important and challenging task in IC manufacturing. In this study the WLCD-CDC closed loop solution offered by Carl Zeiss SMS was examined. This solution aims to improve the wafer level intra-field CDU without the need to run wafer prints and extensive wafer CD metrology. It combines two stand-alone tools: The WLCD tool which measures CD based on aerial imaging technology while applying the exact scanner-used illumination conditions to the photomask and the CDC tool which utilizes an ultra-short femto-second laser to write intra-volume shading elements (Shade-In Elements™) inside the photomask bulk material. The CDC process changes the dose going through the photomask down to the wafer, hence the wafer level intra-field CDU improves. The objective of this study was to evaluate how CDC process is affecting the CD for different type of features and pattern density which are typical for logic and system on chip (SOC) devices. The main findings show that the linearity and proximity behavior is maintained by the CDC process and CDU and CDC Ratio (CDCR) show a linear behavior for the different feature types. Finally, it was demonstrated that the CDU errors of the targeted (critical) feature have been effectively eliminated. In addition, the CDU of all other features have been significantly improved as well.

  5. Rangefinder Metrology for the Green Bank Telescope

    NASA Astrophysics Data System (ADS)

    Goldman, M. A.; Creager, R. E.; Parker, D. H.; Payne, J. A.

    A scanning laser rangefinder metrology system for the 100 meter Green Bank Telescope is described. Use of this system for correction of the primary reflector's shape and pointing of the telescope is described.

  6. The SRTM sub-arcsecond metrology camera

    NASA Technical Reports Server (NTRS)

    Duren, R. M.; Liebe, C.

    2000-01-01

    This paper provides a description of the metrology camera, the process used to prepare it for flight on SRTM, the LED target development effort, test and alignment issues, and the observed in-flight performance.

  7. Frequency Metrology with Optical Lattice Clocks

    NASA Astrophysics Data System (ADS)

    Hong, Feng-Lei; Katori, Hidetoshi

    2010-08-01

    The precision measurement of time and frequency is of great interest for a wide range of applications, including fundamental science and technologies that support broadband communication networks and the navigation with global positioning systems (GPSs). The development of optical frequency measurement based on frequency combs has revolutionized the field of frequency metrology, especially research on optical frequency standards. The proposal and realization of the optical lattice clock have further stimulated studies in the field of optical frequency metrology. Optical carrier transfer using optical fibers has been used to disseminate optical frequencies or compare two optical clocks without degrading their stability and accuracy. In this paper, we review the state-of-the-art development of optical frequency combs, standards, and transfer techniques with emphasis on optical lattice clocks. We address recent results achieved at the University of Tokyo and the National Metrology Institute of Japan in respect of frequency metrology with Sr and Yb optical lattice clocks.

  8. Nanomanufacturing metrology for cellulosic nanomaterials: an update

    NASA Astrophysics Data System (ADS)

    Postek, Michael T.

    2014-08-01

    The development of the metrology and standards for advanced manufacturing of cellulosic nanomaterials (or basically, wood-based nanotechnology) is imperative to the success of this rising economic sector. Wood-based nanotechnology is a revolutionary technology that will create new jobs and strengthen America's forest-based economy through industrial development and expansion. It allows this, previously perceived, low-tech industry to leap-frog directly into high-tech products and processes and thus improves its current economic slump. Recent global investments in nanotechnology programs have led to a deeper appreciation of the high performance nature of cellulose nanomaterials. Cellulose, manufactured to the smallest possible-size ( 2 nm x 100 nm), is a high-value material that enables products to be lighter and stronger; have less embodied energy; utilize no catalysts in the manufacturing, are biologically compatible and, come from a readily renewable resource. In addition to the potential for a dramatic impact on the national economy - estimated to be as much as $250 billion worldwide by 2020 - cellulose-based nanotechnology creates a pathway for expanded and new markets utilizing these renewable materials. The installed capacity associated with the US pulp and paper industry represents an opportunity, with investment, to rapidly move to large scale production of nano-based materials. However, effective imaging, characterization and fundamental measurement science for process control and characterization are lacking at the present time. This talk will discuss some of these needed measurements and potential solutions.

  9. Metrology for AGP - Astrometric Gravitation Probe

    NASA Astrophysics Data System (ADS)

    Gai, Mario; et al.

    2015-08-01

    The Astrometric Gravitation Probe (AGP) is a concept of space mission aimed at tests of Fundamental Physics in the Solar system, using Fizeau interferometry and coronagraphy techniques to implement differential astrometry among superposed stellar fields. The main goal is verification of the General Relativity (GR) and competing gravitation theories in the weak field of the Solar System by high precision measurement of the light deflection in the vicinity of the Sun at < 10-7 and of the main and minor planet dynamics at the microarcsec/year level. The AGP payload concept is based on a single main telescope (1.15 m diameter) implementing a multi-aperture Fizeau interferometer, for simultaneous observation of four regions close to the Solar limb and in opposition; coronagraphic techniques are applied on the elementary sub-apertures. The star displacement due to light deflection is derived by differential astrometry on images taken in different deflection conditions (e.g. ON and OFF). The instrument design is focused on systematic error control through multiple field simultaneous observation and calibration. The metrology system requirements related to the science goals are discussed, and the technical aspects of possible implementations are investigated. The potential benefit of auto-collimation and cophasing techniques derives from monitoring comparably large sections of the optical system common to the stellar beams. The performance at microarcsec level is verified by simulation.

  10. TSOM Method for Nanoelectronics Dimensional Metrology

    SciTech Connect

    Attota, Ravikiran

    2011-11-10

    Through-focus scanning optical microscopy (TSOM) is a relatively new method that transforms conventional optical microscopes into truly three-dimensional metrology tools for nanoscale to microscale dimensional analysis. TSOM achieves this by acquiring and analyzing a set of optical images collected at various focus positions going through focus (from above-focus to under-focus). The measurement resolution is comparable to what is possible with typical light scatterometry, scanning electron microscopy (SEM) and atomic force microscopy (AFM). TSOM method is able to identify nanometer scale difference, type of the difference and magnitude of the difference between two nano/micro scale targets using a conventional optical microscope with visible wavelength illumination. Numerous industries could benefit from the TSOM method--such as the semiconductor industry, MEMS, NEMS, biotechnology, nanomanufacturing, data storage, and photonics. The method is relatively simple and inexpensive, has a high throughput, provides nanoscale sensitivity for 3D measurements and could enable significant savings and yield improvements in nanometrology and nanomanufacturing. Potential applications are demonstrated using experiments and simulations.

  11. Hybrid reference metrology exploiting patterning simulation

    NASA Astrophysics Data System (ADS)

    Rana, Narender; Archie, Chas

    2010-03-01

    Workhorse metrology such as CD-SEM is used during process development, process control, and optical proximity correction model generation and verification. Such metrology needs to be calibrated to handle various types of profiles encountered during IC fabrication. Reference metrology is used for calibration of workhorse metrology. There is an astounding need for sub-half and sub-quarter nanometer measurement uncertainty in the near future technology nodes as envisaged in the International Technology Roadmap for Semiconductors. In this regime of desired measurement uncertainty all metrology techniques are deemed limited and hybrid metrology appears promising to offer a solution. Hybrid metrology is the use of multiple metrology techniques, each with particular strength, to reduce the overall measurement uncertainty. CD-AFM makes use of a flared probe in order to scan the sidewalls and bottom of the pattern on a wafer to provide 3D profile and CD measurements at desired location on the profile. As the CD shrinks with technology nodes especially the space, the size of the AFM probe also needs to shrink while maintaining the flared geometry specifications. Unfortunately the fabrication of such probes is a challenge and new techniques are required to extend reference metrology to the smallest space and hole of interest. This paper proposes a reference system combining CD-AFM and patterning simulation model. This hybrid metrology system enables CD metrology in a space not measurable directly by conventional CD-AFM probe. The key idea is to use the successfully measured profile and CD information from the CD-AFM to calibrate or train the patterning simulation optical and resist model. Ability of this model to predict profile and CD measurement is verified on a physically measured dataset including cross sections and additional CD-AFM measurements. It is hypothesized that this model will be able to predict profile and CD measurements in otherwise immeasurable geometries

  12. Two Approaches to Calibration in Metrology

    SciTech Connect

    Campanelli, Mark

    2014-04-01

    Inferring mathematical relationships with quantified uncertainty from measurement data is common to computational science and metrology. Sufficient knowledge of measurement process noise enables Bayesian inference. Otherwise, an alternative approach is required, here termed compartmentalized inference, because collection of uncertain data and model inference occur independently. Bayesian parameterized model inference is compared to a Bayesian-compatible compartmentalized approach for ISO-GUM compliant calibration problems in renewable energy metrology. In either approach, model evidence can help reduce model discrepancy.

  13. Future metrology needs for synchrotron radiation mirrors

    SciTech Connect

    Assoufid, L.; Hignette, O.; Howells, M.; Irick, S.; Lammert, H.; Takacs, P.

    2000-08-14

    An international workshop on metrology for X-ray and neutron optics, the first of its kind, was held March 16-17, 2000, at the Advanced Photon Source at Argonne National Laboratory. Engineers and scientists from around the world met to evaluate current metrology instrumentation and methods used to characterize the surface figure and finish of long, grazing-incidence optics used in synchrotron radiation beamlines, and to consider future needs for synchrotron, FEL, and neutron sources.

  14. NIF Target Assembly Metrology Methodology and Results

    SciTech Connect

    Alger, E. T.; Kroll, J.; Dzenitis, E. G.; Montesanti, R.; Hughes, J.; Swisher, M.; Taylor, J.; Segraves, K.; Lord, D. M.; Reynolds, J.; Castro, C.; Edwards, G.

    2011-01-01

    During our inertial confinement fusion (ICF) experiments at the National Ignition Facility (NIF) we require cryogenic targets at the 1-cm scale to be fabricated, assembled, and metrologized to micron-level tolerances. During assembly of these ICF targets, there are physical dimensmetrology is completed using optical coordinate measurement machines that provide repeatable measurements with micron precision, while also allowing in-process data collection for absolute accuracy in assembly. To date, 51 targets have been assembled and metrologized, and 34 targets have been successfully fielded on NIF relying on these metrology data. In the near future, ignition experiments on NIF will require tighter tolerances and more demanding target assembly and metrology capability. Metrology methods, calculations, and uncertainty estimates will be discussed. Target diagnostic port alignment, target position, and capsule location results will be reviewed for the 2009 Energetics Campaign. The information is presented via control charts showing the effect of process improvements that were made during target production. Certain parameters, including capsule position, met the 2009 campaign specifications but will have much tighter requirements in the future. Finally, in order to meet these new requirements assembly process changes and metrology capability upgrades will be necessary.

  15. "A" Is for Aerial Maps and Art

    ERIC Educational Resources Information Center

    Todd, Reese H.; Delahunty, Tina

    2007-01-01

    The technology of satellite imagery and remote sensing adds a new dimension to teaching and learning about maps with elementary school children. Just a click of the mouse brings into view some images of the world that could only be imagined a generation ago. Close-up aerial pictures of the school and neighborhood quickly catch the interest of…

  16. ENVIRONMENTAL APPLICATION OF LOW ALTITUDE AERIAL PHOTOGRAPHY

    EPA Science Inventory

    The most practical avenue for development of these goals is to continue to use the LAAPS system at field sites that require aerial imaging. For the sake of convenience, I believe that the local field sites can provide a convenient location to develop new applications and test enh...

  17. Aerial Scene Recognition using Efficient Sparse Representation

    SciTech Connect

    Cheriyadat, Anil M

    2012-01-01

    Advanced scene recognition systems for processing large volumes of high-resolution aerial image data are in great demand today. However, automated scene recognition remains a challenging problem. Efficient encoding and representation of spatial and structural patterns in the imagery are key in developing automated scene recognition algorithms. We describe an image representation approach that uses simple and computationally efficient sparse code computation to generate accurate features capable of producing excellent classification performance using linear SVM kernels. Our method exploits unlabeled low-level image feature measurements to learn a set of basis vectors. We project the low-level features onto the basis vectors and use simple soft threshold activation function to derive the sparse features. The proposed technique generates sparse features at a significantly lower computational cost than other methods~\\cite{Yang10, newsam11}, yet it produces comparable or better classification accuracy. We apply our technique to high-resolution aerial image datasets to quantify the aerial scene classification performance. We demonstrate that the dense feature extraction and representation methods are highly effective for automatic large-facility detection on wide area high-resolution aerial imagery.

  18. A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM

    NASA Astrophysics Data System (ADS)

    Vaid, Alok; Yan, Bin Bin; Jiang, Yun Tao; Kelling, Mark; Hartig, Carsten; Allgair, John; Ebersbach, Peter; Sendelbach, Matthew; Rana, Narender; Katnani, Ahmad; Mclellan, Erin; Archie, Chas; Bozdog, Cornel; Kim, Helen; Sendler, Michael; Ng, Susan; Sherman, Boris; Brill, Boaz; Turovets, Igor; Urensky, Ronen

    2011-03-01

    Shrinking design rules and reduced process tolerances require tight control of CD linewidth, feature shape, and profile of the printed geometry. The Holistic Metrology approach consists of utilizing all available information from different sources like data from other toolsets, multiple optical channels, multiple targets, etc. to optimize metrology recipe and improve measurement performance. Various in-line critical dimension (CD) metrology toolsets like Scatterometry OCD (Optical CD), CD-SEM (CD Scanning Electron Microscope) and CD-AFM (CD Atomic Force Microscope) are typically utilized individually in fabs. Each of these toolsets has its own set of limitations that are intrinsic to specific measurement technique and algorithm. Here we define "Hybrid Metrology" to be the use of any two or more metrology toolsets in combination to measure the same dataset. We demonstrate the benefits of the Hybrid Metrology on two test structures: 22nm node Gate Develop Inspect (DI) & 32nm node FinFET Gate Final Inspect (FI). We will cover measurement results obtained using typical BKM as well as those obtained by utilizing the Hybrid Metrology approach. Measurement performance will be compared using standard metrology metrics for example accuracy and precision.

  19. Nuclear Technology. Course 27: Metrology. Module 27-1, Fundamentals of Metrology.

    ERIC Educational Resources Information Center

    Selleck, Ben; Espy, John

    This first in a series of eight modules for a course titled Metrology describes the fundamentals of metrology as they pertain to dimensional inspection. The module follows a typical format that includes the following sections: (1) introduction, (2) module prerequisites, (3) objectives, (4) notes to instructor/student, (5) subject matter, (6)…

  20. Nuclear Technology. Course 26: Metrology. Module 27-7, Statistical Techniques in Metrology.

    ERIC Educational Resources Information Center

    Espy, John; Selleck, Ben

    This seventh in a series of eight modules for a course titled Metrology focuses on descriptive and inferential statistical techniques in metrology. The module follows a typical format that includes the following sections: (1) introduction, (2) module prerequisites, (3) objectives, (4) notes to instructor/student, (5) subject matter, (6) materials…

  1. On the benefit of high resolution and low aberrations for in-die mask registration metrology

    NASA Astrophysics Data System (ADS)

    Beyer, Dirk; Seidel, Dirk; Heisig, Sven; Steinert, Steffen; Töpfer, Susanne; Scherübl, Thomas; Hetzler, Jochen

    2014-10-01

    With the introduction of complex lithography schemes like double and multi - patterning and new design principles like gridded designs with cut masks the requirements for mask to mask overlay have increased dramatically. Still, there are some good news too for the mask industry since more mask are needed and qualified. Although always confronted with throughput demands, latest writing tool developments are able to keep pace with ever increasing pattern placement specs not only for global signatures but for in-die features within the active area. Placement specs less than 3nm (max. 3 Sigma) are expected and needed in all cases in order to keep the mask contribution to the overall overlay budget at an accepted level. The qualification of these masks relies on high precision metrology tools which have to fulfill stringent metrology as well as resolution constrains at the same time. Furthermore, multi-patterning and gridded designs with pinhole type cut masks are drivers for a paradigm shift in registration metrology from classical registration crosses to in-die registration metrology on production features. These requirements result in several challenges for registration metrology tools. The resolution of the system must be sufficiently high to resolve small production features. At the same time tighter repeatability is required. Furthermore, tool induced shift (TIS) limit the accuracy of in-die measurements. This paper discusses and demonstrates the importance of low illumination wavelength together with low aberrations for best contrast imaging for in-die registration metrology. Typical effects like tool induced shift are analyzed and evaluated using the ZEISS PROVE® registration metrology tool. Additionally, we will address performance gains when going to higher resolution. The direct impact on repeatability for small features by registration measurements will be discussed as well.

  2. Metrology: Measurement Assurance Program Guidelines

    NASA Technical Reports Server (NTRS)

    Eicke, W. G.; Riley, J. P.; Riley, K. J.

    1995-01-01

    The 5300.4 series of NASA Handbooks for Reliability and Quality Assurance Programs have provisions for the establishment and utilization of a documented metrology system to control measurement processes and to provide objective evidence of quality conformance. The intent of these provisions is to assure consistency and conformance to specifications and tolerances of equipment, systems, materials, and processes procured and/or used by NASA, its international partners, contractors, subcontractors, and suppliers. This Measurement Assurance Program (MAP) guideline has the specific objectives to: (1) ensure the quality of measurements made within NASA programs; (2) establish realistic measurement process uncertainties; (3) maintain continuous control over the measurement processes; and (4) ensure measurement compatibility among NASA facilities. The publication addresses MAP methods as applied within and among NASA installations and serves as a guide to: control measurement processes at the local level (one facility); conduct measurement assurance programs in which a number of field installations are joint participants; and conduct measurement integrity (round robin) experiments in which a number of field installations participate to assess the overall quality of particular measurement processes at a point in time.

  3. 1. NORTHWEST OBLIQUE AERIAL VIEW OF FORT DELAWARE AND PEA ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    1. NORTHWEST OBLIQUE AERIAL VIEW OF FORT DELAWARE AND PEA PATCH ISLAND. REMAINS OF SEA WALL VISIBLE IN FOREGROUND AND RIGHT OF IMAGE. - Fort Delaware, Sea Wall, Pea Patch Island, Delaware City, New Castle County, DE

  4. NORTHWEST OBLIQUE AERIAL VIEW OF FORT DELAWARE AND PEA PATCH ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    NORTHWEST OBLIQUE AERIAL VIEW OF FORT DELAWARE AND PEA PATCH ISLAND. REMAINS OF SEA WALL VISIBLE IN FOREGROUND AND RIGHT OF IMAGE - Fort Delaware, Pea Patch Island, Delaware City, New Castle County, DE

  5. Probe microscopy for metrology of next generation devices

    NASA Astrophysics Data System (ADS)

    Humphris, Andrew D. L.; Zhao, Bin; Bastard, David; Bunday, Benjamin

    2016-03-01

    As device geometries shrink and the number of transistors on the wafer grows, new metrology solutions are required to support the development and production of next generation structures for the 10 nm node and beyond. This paper presents an innovative probe based microscope, the Rapid Probe Microscope (RPM), which is capable of obtaining nondestructive high resolution sub-nm information in all 3 dimensions and in a vacuum environment. The RPM is a platform supporting a novel probe detection and actuation system. It enables new imaging modes which are optimized for profiling narrow high aspect ratio structures as found in semiconductor devices. Additionally, the RPM can be operated in a vacuum environment allowing in-situ hybrid metrology solutions, for example operating alongside a CD or defect review SEM. Results are presented showing the imaging of thin lines and trenches, < 20 nm in width, using both a SEM and RPM to provide complementary information about the lateral and vertical dimensions of the structures. Comparison of images collected with different probes and at different sample locations demonstrates the ability of the RPM to operate consistently with long probe life and at high speed which is required for use in the High Volume Manufacturing (HVM) environment.

  6. Scaffold characterization using NLO multimodal microscopy in metrology for regenerative medicine

    NASA Astrophysics Data System (ADS)

    Mortati, Leonardo; Divieto, Carla; Boffitto, Monica; Sartori, Susanna; Ciardelli, Gianluca; Sassi, Maria Paola

    2013-09-01

    Metrology in regenerative medicine aims to develop traceable measurement technologies for characterizing cellular and macromolecule behaviour in regenerative medicine products and processes. One key component in regenerative medicine is using three-dimensional porous scaffolds to guide cells during the regeneration process. The regeneration of specific tissues guided by tissue analogous substrates is dependent on diverse scaffold architectural properties that can be derived quantitatively from scaffolds images. This paper discuss the results obtained with the multimodal NLO microscope recently realized in our laboratory in characterizing 3D tissue engineered (TE) scaffolds colonized from human Mesenchimal stem cells (hMSC), focusing on the study of the three-dimensional metrological parameters.

  7. Aerial Photography Summary Record System

    USGS Publications Warehouse

    U.S. Geological Survey

    1998-01-01

    The Aerial Photography Summary Record System (APSRS) describes aerial photography projects that meet specified criteria over a given geographic area of the United States and its territories. Aerial photographs are an important tool in cartography and a number of other professions. Land use planners, real estate developers, lawyers, environmental specialists, and many other professionals rely on detailed and timely aerial photographs. Until 1975, there was no systematic approach to locate an aerial photograph, or series of photographs, quickly and easily. In that year, the U.S. Geological Survey (USGS) inaugurated the APSRS, which has become a standard reference for users of aerial photographs.

  8. Aerial Terrain Mapping Using Unmanned Aerial Vehicle Approach

    NASA Astrophysics Data System (ADS)

    Tahar, K. N.

    2012-08-01

    This paper looks into the latest achievement in the low-cost Unmanned Aerial Vehicle (UAV) technology in their capacity to map the semi-development areas. The objectives of this study are to establish a new methodology or a new algorithm in image registration during interior orientation process and to determine the accuracy of the photogrammetric products by using UAV images. Recently, UAV technology has been used in several applications such as mapping, agriculture and surveillance. The aim of this study is to scrutinize the usage of UAV to map the semi-development areas. The performance of the low cost UAV mapping study was established on a study area with two image processing methods so that the results could be comparable. A non-metric camera was attached at the bottom of UAV and it was used to capture images at both sites after it went through several calibration steps. Calibration processes were carried out to determine focal length, principal distance, radial lens distortion, tangential lens distortion and affinity. A new method in image registration for a non-metric camera is discussed in this paper as a part of new methodology of this study. This method used the UAV Global Positioning System (GPS) onboard to register the UAV image for interior orientation process. Check points were established randomly at both sites using rapid static Global Positioning System. Ground control points are used for exterior orientation process, and check point is used for accuracy assessment of photogrammetric product. All acquired images were processed in a photogrammetric software. Two methods of image registration were applied in this study, namely, GPS onboard registration and ground control point registration. Both registrations were processed by using photogrammetric software and the result is discussed. Two results were produced in this study, which are the digital orthophoto and the digital terrain model. These results were analyzed by using the root mean square

  9. 1.5 nm fabrication of test patterns for characterization of metrological systems

    DOE PAGESBeta

    Babin, Sergey; Calafiore, Giuseppe; Peroz, Christophe; Conley, Raymond; Bouet, Nathalie; Cabrini, Stefano; Chan, Elaine; Lacey, Ian; McKinney, Wayne R.; Yashchuk, Valeriy V.; et al

    2015-11-06

    Any metrology tool is only as good as it is calibrated. The characterization of metrology systems requires test patterns at a scale about ten times smaller than the measured features. The fabrication of patterns with linewidths down to 1.5 nm is described. The test sample was designed in such a way that the distribution of linewidths appears to be random at any location. This pseudorandom test pattern is used to characterize dimensional metrology equipment over its entire dynamic range by extracting the modulation transfer function of the system. The test pattern contains alternating lines of silicon and tungsten silicide, eachmore » according to its designed width. As a result, the fabricated test samples were imaged using a transmission electron microscope, a scanning electron microscope, and an atomic force microscope. (C) 2015 American Vacuum Society.« less

  10. 1.5 nm fabrication of test patterns for characterization of metrological systems

    SciTech Connect

    Babin, Sergey; Calafiore, Giuseppe; Peroz, Christophe; Conley, Raymond; Bouet, Nathalie; Cabrini, Stefano; Chan, Elaine; Lacey, Ian; McKinney, Wayne R.; Yashchuk, Valeriy V.; Vladar, Andras E.

    2015-11-06

    Any metrology tool is only as good as it is calibrated. The characterization of metrology systems requires test patterns at a scale about ten times smaller than the measured features. The fabrication of patterns with linewidths down to 1.5 nm is described. The test sample was designed in such a way that the distribution of linewidths appears to be random at any location. This pseudorandom test pattern is used to characterize dimensional metrology equipment over its entire dynamic range by extracting the modulation transfer function of the system. The test pattern contains alternating lines of silicon and tungsten silicide, each according to its designed width. As a result, the fabricated test samples were imaged using a transmission electron microscope, a scanning electron microscope, and an atomic force microscope. (C) 2015 American Vacuum Society.

  11. Hybrid photonic chip interferometer for embedded metrology

    NASA Astrophysics Data System (ADS)

    Kumar, P.; Martin, H.; Maxwell, G.; Jiang, X.

    2014-03-01

    Embedded metrology is the provision of metrology on the manufacturing platform, enabling measurement without the removal of the work piece. Providing closer integration of metrology upon the manufacturing platform can lead to the better control and increased throughput. In this work we present the development of a high precision hybrid optical chip interferometer metrology device. The complete metrology sensor system is structured into two parts; optical chip and optical probe. The hybrid optical chip interferometer is based on a silica-on-silicon etched integrated-optic motherboard containing waveguide structures and evanescent couplers. Upon the motherboard, electro-optic components such as photodiodes and a semiconductor gain block are mounted and bonded to provide the required functionality. The key structure in the device is a tunable laser module based upon an external-cavity diode laser (ECDL). Within the cavity is a multi-layer thin film filter which is rotated to select the longitudinal mode at which the laser operates. An optical probe, which uses a blazed diffracting grating and collimating objective lens, focuses light of different wavelengths laterally over the measurand. Incident laser light is then tuned in wavelength time to effectively sweep an `optical stylus' over the surface. Wavelength scanning and rapid phase shifting can then retrieve the path length change and thus the surface height. We give an overview of the overall design of the final hybrid photonic chip interferometer, constituent components, device integration and packaging as well as experimental test results from the current version now under evaluation.

  12. Analysis of vegetation indices derived from aerial multispectral and ground hyperspectral data

    Technology Transfer Automated Retrieval System (TEKTRAN)

    Aerial multispectral images are a good source of crop, soil, and ground coverage information. Spectral reflectance indices provide a useful tool for monitoring crop growing status. A series of aerial images were acquired by an airborne MS4100 multispectral imaging system on the cotton and soybean f...

  13. Subaperture approaches for asphere polishing and metrology

    NASA Astrophysics Data System (ADS)

    Tricard, Marc; Dumas, Paul; Forbes, Greg

    2005-02-01

    This paper summarizes some of QED Technologies" latest developments in the field of high-precision polishing and metrology. Magneto-Rheological Finishing (MRF) is a deterministic sub-aperture polishing process that overcomes many of the fundamental limitations of traditional finishing. MRF has demonstrated the ability to produce optical surfaces with accuracies better than 30 nm peak-to-valley (PV) and surface micro-roughness less than 0.5 nm rms on a wide variety of optical glasses, single crystals, and glass-ceramics. The MR fluid forms a polishing tool that is perfectly conformal and therefore can polish a variety of shapes, including flats, spheres, aspheres, prisms, and cylinders, with either round or rectangular apertures. QED"s Sub-aperture Stitching Interferometer (SSI) complements MRF by extending the effective aperture, accuracy, resolution, and dynamic range of a phase-shifting interferometer. This workstation performs automated sub-aperture stitching measurements of spheres, flats, and mild aspheres. It combines a six-axis precision stage system, a commercial Fizeau interferometer, and specially developed software that automates measurement design, data acquisition, and the reconstruction of the full-aperture map of figure error. Aside from the correction of sub-aperture placement errors (such as tilts, optical power, and registration effects), our software also accounts for reference-wave error, distortion, and other aberrations in the interferometer"s imaging optics. By addressing these matters up front, we avoid limitations encountered in earlier stitching work and significantly boost reproducibility beyond that of the integrated interferometer on its own.

  14. Integrating optical fabrication and metrology into the optical design process

    NASA Astrophysics Data System (ADS)

    Harvey, James E.

    2014-12-01

    Image degradation due to scattered radiation from residual optical fabrication errors is a serious problem in many short wavelength (X-ray/EUV) imaging systems. Most commercially-available image analysis codes (ZEMAX, Code V, ASAP, FRED, etc.) currently require the scatter behavior (BSDF data) to be provided as input in order to calculate the image quality of such systems. This BSDF data is difficult to measure and rarely available for the operational wavelengths of interest. Since the smooth-surface approximation is often not satisfied at these short wavelengths, the classical Rayleigh-Rice expression that indicates the BRDF is directly proportional to the surface PSD cannot be used to calculate BRDFs from surface metrology data for even slightly rough surfaces. However, an FFTLog numerical Hankel transform algorithm enables the practical use of the computationally intensive Generalized Harvey-Shack (GHS) surface scatter theory [1] to calculate BRDFs from surface PSDs for increasingly short wavelengths that violate the smooth surface approximation implicit in the Rayleigh-Rice surface scatter theory [2-3]. The recent numerical validation [4] of the GHS theory (a generalized linear systems formulation of surface scatter theory), and an analysis of image degradation due to surface scatter in the presence of aberrations [5] has provided credence to the development of a systems engineering analysis of image quality as degraded not only by diffraction effects and geometrical aberrations, but to scattering effects due to residual optical fabrication errors as well. These advances, combined with the continuing increase in computer speed, leave us poised to fully integrate optical metrology and fabrication into the optical design process.

  15. X-ray pulse wavefront metrology using speckle tracking

    PubMed Central

    Berujon, Sebastien; Ziegler, Eric; Cloetens, Peter

    2015-01-01

    An instrument allowing the quantitative analysis of X-ray pulsed wavefronts is presented and its processing method explained. The system relies on the X-ray speckle tracking principle to accurately measure the phase gradient of the X-ray beam from which beam optical aberrations can be deduced. The key component of this instrument, a semi-transparent scintillator emitting visible light while transmitting X-rays, allows simultaneous recording of two speckle images at two different propagation distances from the X-ray source. The speckle tracking procedure for a reference-less metrology mode is described with a detailed account on the advanced processing schemes used. A method to characterize and compensate for the imaging detector distortion, whose principle is also based on speckle, is included. The presented instrument is expected to find interest at synchrotrons and at the new X-ray free-electron laser sources under development worldwide where successful exploitation of beams relies on the availability of an accurate wavefront metrology. PMID:26134791

  16. Speckle decorrelation influence on measurements quality in vortex metrology

    NASA Astrophysics Data System (ADS)

    Angel-Toro, Luciano; Sierra-Sosa, Daniel; Tebaldi, Myrian; Bolognini, Néstor

    2012-10-01

    We study speckle decorrelation effects in connection with conventional vortex metrology techniques. Our proposal is based on processing speckled images recorded by using two different experimental set-ups. In both schemes two laterally displaced patterns are generated: one scheme allows for obtaining undecorrelated speckle distributions and the other for decorrelated ones. Vortex networks associated with speckle patterns are analyzed by employing the usual tools developed for vortex metrology. For each recorded image, a 2D pseudo-phase map is generated on the basis of the Reisz transform. Then the vortices are located, and parameterized in terms of their topological charge, eccentricity, vorticity and angles between the zero crossing lines from the real and the imaginary parts of the analytical signal. After tracking the homologous vortices onto the maps, the histograms corresponding to the coordinate displacements are analyzed. We show that histograms interpretation is prone to failure due to its high sensitivity to decorrelation. Experimental evidences are presented to support the restrictions imposed by decorrelation of actual speckles due to uniform in-plane displacements.

  17. X-ray pulse wavefront metrology using speckle tracking.

    PubMed

    Berujon, Sebastien; Ziegler, Eric; Cloetens, Peter

    2015-07-01

    An instrument allowing the quantitative analysis of X-ray pulsed wavefronts is presented and its processing method explained. The system relies on the X-ray speckle tracking principle to accurately measure the phase gradient of the X-ray beam from which beam optical aberrations can be deduced. The key component of this instrument, a semi-transparent scintillator emitting visible light while transmitting X-rays, allows simultaneous recording of two speckle images at two different propagation distances from the X-ray source. The speckle tracking procedure for a reference-less metrology mode is described with a detailed account on the advanced processing schemes used. A method to characterize and compensate for the imaging detector distortion, whose principle is also based on speckle, is included. The presented instrument is expected to find interest at synchrotrons and at the new X-ray free-electron laser sources under development worldwide where successful exploitation of beams relies on the availability of an accurate wavefront metrology. PMID:26134791

  18. Overlay metrology solutions in a triple patterning scheme

    NASA Astrophysics Data System (ADS)

    Leray, Philippe; Mao, Ming; Baudemprez, Bart; Amir, Nuriel

    2015-03-01

    Overlay metrology tool suppliers are offering today several options to their customers: Different hardware (Image Based Overlay or Diffraction Based Overlay), different target designs (with or without segmentation) or different target sizes (from 5 um to 30 um). All these variations are proposed to resolve issues like robustness of the target towards process variations, be more representative of the design or increase the density of measurements. In the frame of the development of a triple patterning BEOL scheme of 10 nm node layer, we compare IBO targets (standard AIM, AIMid and multilayer AIMid). The metrology tools used for the study are KLA-Tencor's nextgeneration Archer 500 system (scatterometry- and imaging-based measurement technologies on the same tool). The overlay response and fingerprint of these targets will be compared using a very dense sampling (up to 51 pts per field). The benefit of indie measurements compared to the traditional scribes is discussed. The contribution of process effects to overlay values are compared to the contribution of the performance of the target. Different targets are combined in one measurement set to benefit from their different strengths (performance vs size). The results are summarized and possible strategies for a triple patterning schemes are proposed.

  19. NASA metrology information system: A NEMS subsystem

    NASA Technical Reports Server (NTRS)

    German, E. S., Jr.; Kern, F. A.; Yow, R. P.; Peterson, E.

    1984-01-01

    the NASA Metrology Information Systems (NMIS) is being developed as a standardized tool in managing the NASA field Center's instrument calibration programs. This system, as defined by the NASA Metrology and Calibration Workshop, will function as a subsystem of the newly developed NASA Equipment Management System (NEMS). The Metrology Information System is designed to utilize and update applicable NEMS data fields for controlled property and to function as a stand alone system for noncontrolled property. The NMIS provides automatic instrument calibration recall control, instrument historical performance data storage and analysis, calibration and repair labor and parts cost data, and instrument user and location data. Nineteen standardized reports were developed to analyze calibration system operations.

  20. OCD metrology by floating n/k

    NASA Astrophysics Data System (ADS)

    Yu, Shinn-Sheng; Huang, Jacky; Ke, Chih-Ming; Gau, Tsai-Sheng; Lin, Burn J.; Yen, Anthony; Lane, Lawrence; Vuong, Vi; Chen, Yan

    2007-03-01

    In this paper, one of the major contributions to the OCD metrology error, resulting from within-wafer variation of the refractive index/extinction coefficient (n/k) of the substrate, is identified and quantified. To meet the required metrology accuracy for the 65-nm node and beyond, it is suggested that n/k should be floating when performing the regression for OCD modeling. A feasible way of performing such regression is proposed and verified. As shown in the presented example, the measured CDU (3σ) with n/k fixed and n/k floating is 1.94 nm and 1.42 nm, respectively. That is, the metrology error of CDU committed by assuming n/k fixed is more than 35% of the total CDU.

  1. Advances in Solar Radiometry and Metrology

    SciTech Connect

    Myers, D.; Andreas, A.; Reda, I.; Gotseff, P.; Wilcox, S.; Stoffel, T.; Anderberg, M.

    2005-01-01

    The Solar Radiometry and Metrology task at the National Renewable Energy Laboratory (NREL) provides traceable optical radiometric calibrations and measurements to photovoltaic (PV) researchers and the PV industry. Traceability of NREL solar radiometer calibrations to the World Radiometric Reference (WRR) was accomplished during the NREL Pyrheliometer Comparison in October 2003. The task has calibrated 10 spectral and more than 180 broadband radiometers for solar measurements. Other accomplishments include characterization of pyranometer thermal offset errors with laboratory and spectral modeling tools; developing a simple scheme to correct pyranometer data for known responsivity variations; and measuring detailed spectral distributions of the NREL High Intensity Pulsed Solar Simulator (HIPSS) as a function of lamp voltage and time. The optical metrology functions support the NREL Measurement and Characterization Task effort for ISO 17025 accreditation of NREL Solar Reference Cell Calibrations. Optical metrology functions have been integrated into the NREL quality system and audited for ISO17025 compliance.

  2. Aerial Explorers and Robotic Ecosystems

    NASA Technical Reports Server (NTRS)

    Young, Larry A.; Pisanich, Greg

    2004-01-01

    A unique bio-inspired approach to autonomous aerial vehicle, a.k.a. aerial explorer technology is discussed. The work is focused on defining and studying aerial explorer mission concepts, both as an individual robotic system and as a member of a small robotic "ecosystem." Members of this robotic ecosystem include the aerial explorer, air-deployed sensors and robotic symbiotes, and other assets such as rovers, landers, and orbiters.

  3. Optical metrology for very large convex aspheres

    NASA Astrophysics Data System (ADS)

    Burge, J. H.; Su, P.; Zhao, C.

    2008-07-01

    Telescopes with very large diameter or with wide fields require convex secondary mirrors that may be many meters in diameter. The optical surfaces for these mirrors can be manufactured to the accuracy limited by the surface metrology. We have developed metrology systems that are specifically optimized for measuring very large convex aspheric surfaces. Large aperture vibration insensitive sub-aperture Fizeau interferometer combined with stitching software give high resolution surface measurements. The global shape is corroborated with a coordinate measuring machine based on the swing arm profilometer.

  4. Interferometric tomography metrology of conformal optics

    NASA Astrophysics Data System (ADS)

    Gutin, Mikhail; Gutin, Olga; Wang, Xu-Ming; Ehlinger, Dennis

    2013-06-01

    Conformal windows and domes improve aerodynamic quality of missiles and aircraft but introduce significant optical aberrations. These aberrations can be compensated, provided both window and corrective optics are fabricated to high tolerances. Highly accurate measurement of conformal optics is required for success of the fabrication process. This paper describes the development of the Interferometric Tomography - a new tool for metrology of conformal aspheric optics, including optics with very high aberrations. The metrology system is designed to measure wavefront aberrations as well as the optical figure of both surfaces.

  5. Vacuum Technology Considerations For Mass Metrology

    PubMed Central

    Abbott, Patrick J.; Jabour, Zeina J.

    2011-01-01

    Vacuum weighing of mass artifacts eliminates the necessity of air buoyancy correction and its contribution to the measurement uncertainty. Vacuum weighing is also an important process in the experiments currently underway for the redefinition of the SI mass unit, the kilogram. Creating the optimum vacuum environment for mass metrology requires careful design and selection of construction materials, plumbing components, pumping, and pressure gauging technologies. We review the vacuum technology1 required for mass metrology and suggest procedures and hardware for successful and reproducible operation. PMID:26989593

  6. Mask Design for the Space Interferometry Mission Internal Metrology

    NASA Technical Reports Server (NTRS)

    Marx, David; Zhao, Feng; Korechoff, Robert

    2005-01-01

    This slide presentation reviews the mask design used for the internal metrology of the Space Interferometry Mission (SIM). Included is information about the project, the method of measurements with SIM, the internal metrology, numerical model of internal metrology, wavefront examples, performance metrics, and mask design

  7. Unmanned aerial survey of elephants.

    PubMed

    Vermeulen, Cédric; Lejeune, Philippe; Lisein, Jonathan; Sawadogo, Prosper; Bouché, Philippe

    2013-01-01

    The use of a UAS (Unmanned Aircraft System) was tested to survey large mammals in the Nazinga Game Ranch in the south of Burkina Faso. The Gatewing ×100™ equipped with a Ricoh GR III camera was used to test animal reaction as the UAS passed, and visibility on the images. No reaction was recorded as the UAS passed at a height of 100 m. Observations, made on a set of more than 7000 images, revealed that only elephants (Loxodonta africana) were easily visible while medium and small sized mammals were not. The easy observation of elephants allows experts to enumerate them on images acquired at a height of 100 m. We, therefore, implemented an aerial strip sample count along transects used for the annual wildlife foot count. A total of 34 elephants were recorded on 4 transects, each overflown twice. The elephant density was estimated at 2.47 elephants/km(2) with a coefficient of variation (CV%) of 36.10%. The main drawback of our UAS was its low autonomy (45 min). Increased endurance of small UAS is required to replace manned aircraft survey of large areas (about 1000 km of transect per day vs 40 km for our UAS). The monitoring strategy should be adapted according to the sampling plan. Also, the UAS is as expensive as a second-hand light aircraft. However the logistic and flight implementation are easier, the running costs are lower and its use is safer. Technological evolution will make civil UAS more efficient, allowing them to compete with light aircraft for aerial wildlife surveys. PMID:23405088

  8. Unmanned Aerial Survey of Elephants

    PubMed Central

    Vermeulen, Cédric; Lejeune, Philippe; Lisein, Jonathan; Sawadogo, Prosper; Bouché, Philippe

    2013-01-01

    The use of a UAS (Unmanned Aircraft System) was tested to survey large mammals in the Nazinga Game Ranch in the south of Burkina Faso. The Gatewing ×100™ equipped with a Ricoh GR III camera was used to test animal reaction as the UAS passed, and visibility on the images. No reaction was recorded as the UAS passed at a height of 100 m. Observations, made on a set of more than 7000 images, revealed that only elephants (Loxodonta africana) were easily visible while medium and small sized mammals were not. The easy observation of elephants allows experts to enumerate them on images acquired at a height of 100 m. We, therefore, implemented an aerial strip sample count along transects used for the annual wildlife foot count. A total of 34 elephants were recorded on 4 transects, each overflown twice. The elephant density was estimated at 2.47 elephants/km2 with a coefficient of variation (CV%) of 36.10%. The main drawback of our UAS was its low autonomy (45 min). Increased endurance of small UAS is required to replace manned aircraft survey of large areas (about 1000 km of transect per day vs 40 km for our UAS). The monitoring strategy should be adapted according to the sampling plan. Also, the UAS is as expensive as a second-hand light aircraft. However the logistic and flight implementation are easier, the running costs are lower and its use is safer. Technological evolution will make civil UAS more efficient, allowing them to compete with light aircraft for aerial wildlife surveys. PMID:23405088

  9. Aerial photographic reproductions

    USGS Publications Warehouse

    U.S. Geological Survey

    1971-01-01

    Geological Survey vertical aerial photography is obtained primarily for topographic and geologic mapping. Reproductions from this photography are usually satisfactory for general use. Because reproductions are not stocked, but are custom processed for each order, they cannot be returned for credit or refund.

  10. Aerial of the VAB

    NASA Technical Reports Server (NTRS)

    2000-01-01

    Even in this aerial view at KSC, the Vehicle Assembly Building is imposing. In front of it is the Launch Control Center. In the background is the Rotation/Processing Facility, next to the Banana Creek. In the foreground is the Saturn Causeway that leads to Launch Pads 39A and 39B.

  11. Aerial Perspective Artistry

    ERIC Educational Resources Information Center

    Wolfe, Linda

    2010-01-01

    This article presents a lesson centering on aerial perspective artistry of students and offers suggestions on how art teachers should carry this project out. This project serves to develop students' visual perception by studying reproductions by famous artists. This lesson allows one to imagine being lured into a landscape capable of captivating…

  12. Profile variation impact on FIB cross-section metrology

    NASA Astrophysics Data System (ADS)

    Cordes, Aaron; Bunday, Benjamin; Nadeau, Jim

    2012-03-01

    The focused ion beam (FIB) milling tool is an important component of reference metrology and process characterization, both as a supporting instrument for bulk sample preparation before forwarding to the transmission electron microscope (TEM) and other instruments and as an in situ measurement instrument using angled scanning electron microscopy. As features grow denser, deeper and more demanding, full-profile reference metrology is needed, and this methodology will only grow in importance. Thus, the ability to extract accurate dimensional and profile information out of the crosssectional faces produced by FIB milling is critical. For features that demonstrate perfect symmetry in the plane of the cross section, analyzing images and extracting metrology data are straightforward. However, for industrial materials, symmetry is not a safe assumption: as features shrink, the line edge and sidewall roughness increases as a percentage of the overall feature dimension. Furthermore, with the introduction of more complex architectures such as 3D memory and FinFETs, the areas of greatest interest, such as the intersections of wrap-around gates, cannot be assumed to be symmetrical in any given plane if cut placement is not precisely controlled. Therefore it is important to establish the exact location and repeatability of the cross-section plane, both in terms of coordinate placement and effective angle of the milled surface. To this end, we prepared designed-in line edge roughness samples in the Albany Nanotech facility using SEMATECH's AMAG6 metrology reticle. The samples were thoroughly characterized before being milled by a non-destructive, sidewall-scanning atomic force microscope (AFM). These samples are then milled and measured under varying process and setup parameters using a single-beam FIB with angled SEM. We established methodologies that allow precise alignment of the cut planes of slice-and-view FIB milling to 3D-AFM scan lines to compare repeated sections

  13. Development of metrological NDE methods for microturbine ceramic components

    SciTech Connect

    Lee, H.-R.; Ellingson, W. A.

    1999-12-23

    In this work, X-ray computed tomographic imaging technology with high spatial resolution has been explored for metrological applications to Si{sub 3}N{sub 4} ceramic turbine wheels. X-ray computed tomography (XCT) data were acquired by a charge-coupled device detector coupled to an image intensifier. Cone-beam XCT reconstruction algorithms were used to allow full-volume data acquisition from the turbine wheels. Special software was developed so that edge detection and complex blade contours could be determined from the XCT data. The feasibility of using the XCT for dimensional analyses was compared with that of a coordinate-measuring machine. Details of the XCT system, data acquisition, and dimensional comparisons will be presented.

  14. Coherent double-color interference microscope for traceable optical surface metrology

    NASA Astrophysics Data System (ADS)

    Malinovski, I.; França, R. S.; Bessa, M. S.; Silva, C. R.; Couceiro, I. B.

    2016-06-01

    Interference microscopy is an important field of dimensional surface metrology because it provides direct traceability of the measurements to the SI base unit definition of the metre. With a typical measurement range from micrometres to nanometres interference microscopy (IM) covers the gap between classic metrology and nanometrology, providing continuous transfer of dimensional metrology into new areas of nanoscience and nanotechnology. Therefore IM is considered to be an indispensable tool for traceable transfer of the metre unit to different instruments. We report here the metrological study of an absolute Linnik interference microscope (IM) based on two frequency stabilized lasers. The design permits the flexible use of both lasers for measurements depending on the demand of the concrete measurement task. By principle of operation IM is combination of imaging and phase-shifting interferometry (PSI). The traceability is provided by the wavelength reference, that is, a He-Ne 633 nm stabilized laser. The second laser source, that is, a Blue-Green 488 nm grating stabilized laser diode, is used for improvements of resolution, and also for resolving integer fringe discontinuities on sharp features of the surface. The IM was optimized for surface height metrology. We have performed the study of the systematic effects of the measurements. This study allowed us to improve the hardware and software of IM and to find corrections for main systematic errors. The IM is purposed for 1D to 3D height metrology and surface topography in an extended range from nanometres to micrometres. The advantages and disadvantages of the design and developed methods are discussed.

  15. Optical metrology for Starlight Separated Spacecraft Stellar Interferometry Mission

    NASA Technical Reports Server (NTRS)

    Dubovitsky, S.; Lay, O. P.; Peters, R. D.; Abramovici, A.; Asbury, C. G.; Kuhnert, A. C.; Mulder, J. L.

    2002-01-01

    We describe a high-precision inter-spacecraft metrology system designed for NASA 's StarLight mission, a space-based separated-spacecraft stellar interferometer. It consists of dual-target linear metrology, based on a heterodyne interferometer with carrier phase modulation, and angular metrology designed to sense the pointing of the laser beam and provides bearing information. The dual-target operation enables one metrology beam to sense displacement of two targets independently. We present the current design, breadboard implementation of the Metrology Subsystem in a stellar interferometer testbed and the present state of development of flight qualifiable subsystem components.

  16. Status of the Metrology Light Source

    SciTech Connect

    Klein, R.; Ulm, G.; Feikes, J.; Hartrott, M. von; Wuestefeld, G.

    2010-06-23

    The Physikalisch-Technische Bundesanstalt (PTB), the German national metrology institute, has set up the low-energy electron storage ring Metrology Light Source (MLS) in close cooperation with the Helmholtz-Zentrum Berlin (HZB, formerly BESSY). This new storage ring has been in regular user operation since April 2008 and is dedicated to synchrotron-radiation-based metrology and technological developments in the far-IR/THz, IR, UV, VUV and EUV spectral range. The MLS has a double-bend-achromate lattice structure, injection is from a 105 MeV racetrack microtron. The electron energy can be ramped to any value from 105 MeV up to 630 MeV and the electron beam current covers the range from one stored electron (1 pA) up to 200 mA. The MLS is the first electron storage ring optimized for the generation of coherent synchrotron radiation, based on an electron bunch shortening mode. In this mode, MLS delivers coherent radiation in the far-IR/THz spectral range with enhanced intensity as compared to the normal mode of operation. Several beamlines are in operation or in construction, including one undulator beamline, bending magnet beamlines for the calibration of radiation sources and detectors and for reflectometry, an EUV metrology beamline and three IR/THz beamlines.

  17. Absolute optical metrology : nanometers to kilometers

    NASA Technical Reports Server (NTRS)

    Dubovitsky, Serge; Lay, O. P.; Peters, R. D.; Liebe, C. C.

    2005-01-01

    We provide and overview of the developments in the field of high-accuracy absolute optical metrology with emphasis on space-based applications. Specific work on the Modulation Sideband Technology for Absolute Ranging (MSTAR) sensor is described along with novel applications of the sensor.

  18. Quantum metrology with Bose-Einstein condensates

    SciTech Connect

    Boixo, Sergio; Datta, Animesh; Davis, Matthew J.; Flammia, Steven T.; Shaji, Anil; Tacla, Alexandre B.; Caves, Carlton M.

    2009-04-13

    We show how a generalized quantum metrology protocol can be implemented in a two-mode Bose-Einstein condensate of n atoms, achieving a sensitivity that scales better than 1/n and approaches 1/n{sup 3/2} for appropriate design of the condensate.

  19. Note: Near infrared interferometric silicon wafer metrology

    NASA Astrophysics Data System (ADS)

    Choi, M. S.; Park, H. M.; Joo, K. N.

    2016-04-01

    In this investigation, two near infrared (NIR) interferometric techniques for silicon wafer metrology are described and verified with experimental results. Based on the transparent characteristic of NIR light to a silicon wafer, the fiber based spectrally resolved interferometry can measure the optical thickness of the wafer and stitching low coherence scanning interferometry can reconstruct entire surfaces of the wafer.

  20. MICROSCALE METROLOGY USING STANDING WAVE PROBES

    SciTech Connect

    Bauza, M B; Woody, S C; Smith, S T; Seugling, R M; Darnell, I; Florando, J N

    2008-08-04

    Miniaturization has been one of the driving forces in the development of new technologies leading to new products in a variety of industries. As a result, the integration of components over several orders of magnitude on the length scale poses enormous challenges for quality assurance and control. Therefore, new solutions are necessary to meet the growing need for more challenging metrology tasks and metrology requirements in nano- and micro-technology. However, with miniaturization, new challenges arise such as the increased influence of adhesion, electrostatic, Van der Waals and meniscus forces that affect the measurement process. Technical solutions to overcome these micro- and nano-metrology challenges will include the need for traceability, new calibration procedures and calibration artifacts. Over the past decade many new metrology tools have been proposed, however; for contact based measurements, adhesion between the measurement probe and the specimen still proves to be one of the more difficult challenges to overcome. To address this issue, a new class of tactile sensing probe referred to as standing wave sensor has been developed and was previously presented. Previous work introduced the principle of operation of the standing wave senor. This work presents new measurements showing applications of the standing wave probe as the sensing element in a microscale high aspect ratio profiling system.

  1. Matrix product states for quantum metrology.

    PubMed

    Jarzyna, Marcin; Demkowicz-Dobrzański, Rafał

    2013-06-14

    We demonstrate that the optimal states in lossy quantum interferometry may be efficiently simulated using low rank matrix product states. We argue that this should be expected in all realistic quantum metrological protocols with uncorrelated noise and is related to the elusive nature of the Heisenberg precision scaling in the asymptotic limit of a large number of probes. PMID:25165900

  2. COCOA: tracking in aerial imagery

    NASA Astrophysics Data System (ADS)

    Ali, Saad; Shah, Mubarak

    2006-05-01

    Unmanned Aerial Vehicles (UAVs) are becoming a core intelligence asset for reconnaissance, surveillance and target tracking in urban and battlefield settings. In order to achieve the goal of automated tracking of objects in UAV videos we have developed a system called COCOA. It processes the video stream through number of stages. At first stage platform motion compensation is performed. Moving object detection is performed to detect the regions of interest from which object contours are extracted by performing a level set based segmentation. Finally blob based tracking is performed for each detected object. Global tracks are generated which are used for higher level processing. COCOA is customizable to different sensor resolutions and is capable of tracking targets as small as 100 pixels. It works seamlessly for both visible and thermal imaging modes. The system is implemented in Matlab and works in a batch mode.

  3. FOREWORD: Special issue on radionuclide metrology

    NASA Astrophysics Data System (ADS)

    Simpson, Bruce; Judge, Steven

    2007-08-01

    This special issue of Metrologia on radionuclide metrology is the first of a trilogy on the subject of ionizing radiation measurement, a field that is overseen by Sections I, II and III of the CIPM's Consultative Committee for Ionizing Radiation (CCRI). The idea was first proposed at the 2003 series of CCRI Section meetings, with the general aim of showcasing the relevance and importance of metrology in ionizing radiation to a broader metrological audience. After the 2005 meeting of Section II (measurement of radionuclides), the radioactivity aspect of the project began to move forward in earnest. A working group was set up with the brief that the special issue should be of use by experienced metrologists as an overview of the 'state of the art' to compare progress and scientific content with those in other fields of metrology, as a resource for new metrologists joining the field and as a guide for users of radioactivity to explain how traceability to the international measurement system may be achieved. Since mankind first became aware of the existence of radioactivity just over a century ago (due to its discovery by Becquerel and further work by the Curies), much has been learnt and understood in the interim period. The field of radionuclide metrology that developed subsequently is broad-based and encompasses, amongst others, nuclear physics (experimental and theory), chemistry, mathematics, mathematical statistics, uncertainty analysis and advanced computing for data analysis, simulation and modelling. To determine the activity of radionuclides accurately requires elements of all of these subjects. In more recent decades the focus has been on the practical applications of radioactivity in industry and the health field in particular. In addition, low-level environmental radioactivity monitoring has taken on ever greater importance in the nuclear power era. These developments have required new detection instrumentation and techniques on an ongoing basis to ensure

  4. Vortex metrology using Fourier analysis techniques: vortex networks correlation fringes.

    PubMed

    Angel-Toro, Luciano; Sierra-Sosa, Daniel; Tebaldi, Myrian; Bolognini, Néstor

    2012-10-20

    In this work, we introduce an alternative method of analysis in vortex metrology based on the application of the Fourier optics techniques. The first part of the procedure is conducted as is usual in vortex metrology for uniform in-plane displacement determination. On the basis of two recorded intensity speckled distributions, corresponding to two states of a diffuser coherently illuminated, we numerically generate an analytical signal from each recorded intensity pattern by using a version of the Riesz integral transform. Then, from each analytical signal, a two-dimensional pseudophase map is generated in which the vortices are located and characterized in terms of their topological charges and their core's structural properties. The second part of the procedure allows obtaining Young's interference fringes when Fourier transforming the light passing through a diffracting mask with multiple apertures at the locations of the homologous vortices. In fact, we use the Fourier transform as a mathematical operation to compute the far-field diffraction intensity pattern corresponding to the multiaperture set. Each aperture from the set is associated with a rectangular hole that coincides both in shape and size with a pixel from recorded images. We show that the fringe analysis can be conducted as in speckle photography in an extended range of displacement measurements. Effects related with speckled decorrelation are also considered. Our experimental results agree with those of speckle photography in the range in which both techniques are applicable. PMID:23089799

  5. High precision metrology of domes and aspheric optics

    NASA Astrophysics Data System (ADS)

    Murphy, Paul E.; Fleig, Jon; Forbes, Greg; Tricard, Marc

    2005-05-01

    Many defense systems have a critical need for high-precision, complex optics. However, fabrication of high quality, advanced optics is often seriously hampered by the lack of accurate and affordable metrology. QED's Subaperture Stitching Interferometer (SSI®) provides a breakthrough technology, enabling the automatic capture of precise metrology data for large and/or strongly curved (concave and convex) parts. QED"s SSI complements next-generation finishing technologies, such as Magnetorheological Finishing (MRF®), by extending the effective aperture, accuracy and dynamic range of a phase-shifting interferometer. This workstation performs automated sub-aperture stitching measurements of spheres, flats, and mild aspheres. It combines a six-axis precision stage system, a commercial Fizeau interferometer, and specially developed software that automates measurement design, data acquisition, and the reconstruction of the full-aperture figure error map. Aside from the correction of sub-aperture placement errors (such as tilts, optical power, and registration effects), our software also accounts for reference-wave error, distortion and other aberrations in the interferometer"s imaging optics. The SSI can automatically measure the full aperture of high numerical aperture surfaces (such as domes) to interferometric accuracy. The SSI extends the usability of a phase measuring interferometer and allows users with minimal training to produce full-aperture measurements of otherwise untestable parts. Work continues to extend this technology to measure aspheric shapes without the use of dedicated null optics. This SSI technology will be described, sample measurement results shown, and various manufacturing applications discussed.

  6. High precision optical surface metrology using deflectometry

    NASA Astrophysics Data System (ADS)

    Huang, Run

    Software Configurable Optical Test System (SCOTS) developed at University of Arizona is a highly efficient optical metrology technique based on the principle of deflectometry, which can achieve comparable accuracy with interferometry but with low-cost hardware. In a SCOTS test, an LCD display is used to generate structured light pattern to illuminate the test optics and the reflected light is captured by a digital camera. The surface slope of test optics is determined by triangulation of the display pixels, test optics, and the camera. The surface shape is obtained by the integration of the slopes. Comparing to interferometry, which has long served as an accurate non-contact optical metrology technology, SCOTS overcomes the limitation of dynamic range and sensitivity to environment. It is able to achieve high dynamic range slope measurement without requiring null optics. In this dissertation, the sensitivity and performance of the test system have been analyzed comprehensively. Sophisticated calibrations of system components have been investigated and implemented in different metrology projects to push this technology to a higher accuracy including low-order terms. A compact on-axis SCOTS system lowered the testing geometry sensitivity in the metrology of 1-meter highly aspheric secondary mirror of Large Binocular Telescope. Sub-nm accuracy was achieved in testing a high precision elliptical X-ray mirror by using reference calibration. A well-calibrated SCOTS was successfully constructed and is, at the time of writing this dissertation, being used to provide surface metrology feedback for the fabrication of the primary mirror of Daniel K. Inouye Solar Telescope which is a 4-meter off-axis parabola with more than 8 mm aspherical departure.

  7. Sea Ice Mapping using Unmanned Aerial Systems

    NASA Astrophysics Data System (ADS)

    Solbø, S.; Storvold, R.

    2011-12-01

    Mapping of sea ice extent and sea ice features is an important task in climate research. Since the arctic coastal and oceanic areas have a high probability of cloud coverage, aerial platforms are superior to satellite measurements for high-resolution optical measurements. However, routine observations of sea ice conditions present a variety of problems using conventional piloted aircrafts. Specially, the availability of suitable aircrafts for lease does not cover the demand in major parts of the arctic. With the recent advances in unmanned aerial systems (UAS), there is a high possibility of establishing routine, cost effective aerial observations of sea ice conditions in the near future. Unmanned aerial systems can carry a wide variety of sensors useful for characterizing sea-ice features. For instance, the CryoWing UAS, a system initially designed for measurements of the cryosphere, can be equipped with digital cameras, surface thermometers and laser altimeters for measuring freeboard of ice flows. In this work we will present results from recent CryoWing sea ice flights on Svalbard, Norway. The emphasis will be on data processing for stitching together images acquired with the non-stabilized camera payload, to form high-resolution mosaics covering large spatial areas. These data are being employed to map ice conditions; including ice and lead features and melt ponds. These high-resolution mosaics are also well suited for sea-ice mechanics, classification studies and for validation of satellite sea-ice products.

  8. A study to analyze six band multispectral images and fabricate a Fourier transform detector. [optical data processing - aerial photography/forests

    NASA Technical Reports Server (NTRS)

    Shackelford, R. G.; Walsh, J. R., Jr.

    1975-01-01

    An automatic Fourier transform diffraction pattern sampling system, used to investigate techniques for forestry classification of six band multispectral aerial photography is presented. Photographs and diagrams of the design, development and fabrication of a hybrid optical-digital Fourier transform detector are shown. The detector was designed around a concentric ring fiber optic array. This array was formed from many optical fibers which were sorted into concentric rings about a single fiber. All the fibers in each ring were collected into a bundle and terminated into a single photodetector. An optical/digital interface unit consisting of a high level multiplexer, and an analog-to-digital amplifier was also constructed and is described.

  9. AERIAL RADIOLOGICAL SURVEYS

    SciTech Connect

    Proctor, A.E.

    1997-06-09

    Measuring terrestrial gamma radiation from airborne platforms has proved to be a useful method for characterizing radiation levels over large areas. Over 300 aerial radiological surveys have been carried out over the past 25 years including U.S. Department of Energy (DOE) sites, commercial nuclear power plants, Formerly Utilized Sites Remedial Action Program/Uranium Mine Tailing Remedial Action Program (FUSRAP/UMTRAP) sites, nuclear weapons test sites, contaminated industrial areas, and nuclear accident sites. This paper describes the aerial measurement technology currently in use by the Remote Sensing Laboratory (RSL) for routine environmental surveys and emergency response activities. Equipment, data-collection and -analysis methods, and examples of survey results are described.

  10. Area and Elevation Changes of a Debris-Covered Glacier and a Clean-Ice Glacier Between 1952-2013 Using Aerial Images and Structure-from-Motion

    NASA Astrophysics Data System (ADS)

    Lardeux, P.; Glasser, N. F.; Holt, T.; Irvine-Fynn, T. D.; Hubbard, B. P.

    2015-12-01

    Since 1952, the clean-ice Glacier Blanc has retreated twice as fast as the adjacent debris-covered Glacier Noir. Located in the French Alps and separated by only 1 km, both glaciers experience the same climatic conditions, making them ideal to evaluate the impact of debris cover on glacier evolution. We used aerial photographs from 16 acquisitions from 1952 to 2013 to reconstruct and analyze glacier elevation changes using Structure-from-Motion (SfM) techniques. Here, we present the process of developing sub-metric resolution digital elevation models (DEMs) from these aerial photographs. By combining 16 DEMs, we produced a dataset of elevation changes of Glacier Noir and Glacier Blanc, including time-series analysis of lateral and longitudinal profiles, glacier hypsometry and mass balance variation. Our preliminary results indicate that Glacier Noir and Glacier Blanc have both thinned to a similar magnitude, ≤ 20 m, despite a 1 km retreat for Glacier Blanc and only 500 m for Glacier Noir. However, these elevation change reconstructions are hampered by large uncertainties, principally due to the lack of independent camera calibration on the historical imagery. Initial attempts using posteriori correction grids have proven to significantly increase the accuracy of these data. We will present some of the uncertainties and solutions linked to the use of SfM on such a large scale and on such an old dataset. This study demonstrates how SfM can be used to investigate long-term trends in environmental change, allowing glacier monitoring to be up-scaled. It also highlights the need for on-going validation of methods to increase the accuracy and precision of SfM in glaciology. This work is not only advancing our understanding of the role of the debris layer, but will also aid glacial geology more generally with, for example, detailed geomorphological analysis of proglacial terrain and Quaternary sciences with quick and accurate reconstruction of a glacial paleo-environment.

  11. Photogrammetric mapping using unmanned aerial vehicle

    NASA Astrophysics Data System (ADS)

    Graça, N.; Mitishita, E.; Gonçalves, J.

    2014-11-01

    Nowadays Unmanned Aerial Vehicle (UAV) technology has attracted attention for aerial photogrammetric mapping. The low cost and the feasibility to automatic flight along commanded waypoints can be considered as the main advantages of this technology in photogrammetric applications. Using GNSS/INS technologies the images are taken at the planned position of the exposure station and the exterior orientation parameters (position Xo, Yo, Zo and attitude ω, φ, χ) of images can be direct determined. However, common UAVs (off-the-shelf) do not replace the traditional aircraft platform. Overall, the main shortcomings are related to: difficulties to obtain the authorization to perform the flight in urban and rural areas, platform stability, safety flight, stability of the image block configuration, high number of the images and inaccuracies of the direct determination of the exterior orientation parameters of the images. In this paper are shown the obtained results from the project photogrammetric mapping using aerial images from the SIMEPAR UAV system. The PIPER J3 UAV Hydro aircraft was used. It has a micro pilot MP2128g. The system is fully integrated with 3-axis gyros/accelerometers, GPS, pressure altimeter, pressure airspeed sensors. A Sony Cyber-shot DSC-W300 was calibrated and used to get the image block. The flight height was close to 400 m, resulting GSD near to 0.10 m. The state of the art of the used technology, methodologies and the obtained results are shown and discussed. Finally advantages/shortcomings found in the study and main conclusions are presented

  12. Geometric optical investigation of the underwater visual field of aerial animals.

    PubMed

    Horváth, G; Varjú, D

    1990-11-01

    The underwater visual field distorted by refraction for aerial animals living near the water surface is investigated by means of geometric optics. The imaging of underwater objects by one and two aerial eyes is studied. The underwater binocular image field is determined for pairs of aerial eyes placed in horizontal and vertical planes. Some possible biooptical consequences of the visual detection of underwater prey and predator by aerial animals are discussed on the basis of the structure of their distorted visual field. PMID:2134486

  13. Metrology, origins, and control of sidewall roughness in chemically amplified resists

    NASA Astrophysics Data System (ADS)

    Reynolds, Geoffrey William

    1999-11-01

    With the advances in microelectronics that continuously require shrinking photoresist features, sidewall roughness of resist features will become increasingly important, and properly measuring and describing the roughness with appropriate parameters also becomes vitally important. To this end, three metrology methods have been compared: top-down scanning electron microscopy measurements that provide fast measurements of the profile roughness but are dependent on the sample configuration; an atomic force microscopy technique measures only the top edge of the resist line; and another atomic force microscopy technique that provides roughness data over the entire depth of the sidewall surface. A comparison of these methods, using a common sample, is presented. Factors contributing to the roughness of four chemically amplified resists are estimated by systematically varying processing conditions for each resist. For the negative-tone resist Shipley SAL 605, the extent of linking and development conditions have the greatest effect on the top surface roughness. The observed sidewall roughness of 5.2 nm RMS (root-mean-square), however, is independent of these processing variables. The positive-tone resist Shipley APEX-E has a sidewall roughness of 3.1 nm RMS and is most affected by the development condition, the quality of the x-ray mask, and by pattern-specific parameters. APEX-E also demonstrates depth-dependent roughness, as the resist closest to the substrate is smoother than resist near the top of the feature. The sidewall roughness of the positive-tone resist Shipley UV5 is around 2.7 nm RMS and also shows depth-dependent roughness. Experiments determining the contribution of roughness transferred via the aerial image from the x-ray mask into UV5 indicate that only low frequency roughness less than 2.0 mum -1 is transferred. Higher frequency roughness is due to factors in the photoresist. The sidewall roughness of an experimental bilayer resist is about 5 to 7 nm RMS

  14. Optical Metrology for the Segmented Optics on the Constellation-X Spectroscopy X-Ray Telescope

    NASA Technical Reports Server (NTRS)

    Content, David; Colella, David; Fleetwood, Charles; Hadjimichael, Theo; Lehan, John; McMann, Joseph; Reid, Paul; Saha, Timo; Wright, Geraldine; Zhang, William

    2004-01-01

    We present the metrology requirements and metrology implementation necessary to prove out the reflector technology for the Constellation X(C-X) spectroscopy X-ray telescope (SXT). This segmented, 1.6m diameter highly nested Wolter-1 telescope presents many metrology and alignment challenges. In particular, these mirrors have a stringent imaging error budget as compared to their intrinsic stiffness; This is required for Constellation-X to have sufficient effective area with the weight requirement. This has implications for the metrology that can be used. A variety of contract and noncontact optical profiling and interferometric methods are combined to test the formed glass substrates before replication and the replicated reflector segments.The reflectors are tested both stand-alone and in-situ in an alignment tower.Some of these methods have not been used on prior X-ray telescopes and some are feasible only because of the segmented approach used on the SXT. Methods discussed include high precision coordinate measurement machines using very low force or optical probe axial interferometric profiling azimuthal circularity profiling and use of advanced null optics such as conical computer generated hologram (CGHs).

  15. Role of diode lasers in metrology

    NASA Astrophysics Data System (ADS)

    Muthukrishnan, Kris

    1995-01-01

    The field of noncontact metrology is maturing as the video camera based and the laser probe based measurements are finding wide acceptance in the fields of semiconductor, micro electronics, disk drive, biomedical, chemical and aerospace industries. Some manufactures of conventional touch-probe based CMMs (Coordinated Measuring Machines) have started integrating video cameras and laser probes to compliment the measurements made by the touch-probe. The delicate nature of the parts and the extremely small feature sizes have fuelled the growing need for the multisensor technology to be incorporated into a single coordinate measuring machine. The laser probes compliment the video based metrology systems in providing the dynamic Z-height capabilities due to their faster data rate and increased resolution and accuracy. This paper highlights the pros and cons of different diode laser based sensors, drawn from the experience of applying them for measurements in different fields.

  16. Metrology: Calibration and measurement processes guidelines

    NASA Technical Reports Server (NTRS)

    Castrup, Howard T.; Eicke, Woodward G.; Hayes, Jerry L.; Mark, Alexander; Martin, Robert E.; Taylor, James L.

    1994-01-01

    The guide is intended as a resource to aid engineers and systems contracts in the design, implementation, and operation of metrology, calibration, and measurement systems, and to assist NASA personnel in the uniform evaluation of such systems supplied or operated by contractors. Methodologies and techniques acceptable in fulfilling metrology quality requirements for NASA programs are outlined. The measurement process is covered from a high level through more detailed discussions of key elements within the process, Emphasis is given to the flowdown of project requirements to measurement system requirements, then through the activities that will provide measurements with defined quality. In addition, innovations and techniques for error analysis, development of statistical measurement process control, optimization of calibration recall systems, and evaluation of measurement uncertainty are presented.

  17. Fuzzy C-Means Algorithm for Segmentation of Aerial Photography Data Obtained Using Unmanned Aerial Vehicle

    NASA Astrophysics Data System (ADS)

    Akinin, M. V.; Akinina, N. V.; Klochkov, A. Y.; Nikiforov, M. B.; Sokolova, A. V.

    2015-05-01

    The report reviewed the algorithm fuzzy c-means, performs image segmentation, give an estimate of the quality of his work on the criterion of Xie-Beni, contain the results of experimental studies of the algorithm in the context of solving the problem of drawing up detailed two-dimensional maps with the use of unmanned aerial vehicles. According to the results of the experiment concluded that the possibility of applying the algorithm in problems of decoding images obtained as a result of aerial photography. The considered algorithm can significantly break the original image into a plurality of segments (clusters) in a relatively short period of time, which is achieved by modification of the original k-means algorithm to work in a fuzzy task.

  18. Formation metrology and control for large separated optics space telescopes

    NASA Technical Reports Server (NTRS)

    Mettler, E.; Quadrelli, M.; Breckenridge, W.

    2002-01-01

    In this paper we present formation flying performance analysis initial results for a representative large space telescope composed of separated optical elements [Mett 02]. A virtual-structure construct (an equivalent rigid body) is created by unique metrology and control that combines both centralized and decentralized methods. The formation may be in orbit at GEO for super-resolution Earth observation, as in the case of Figure 1, or it may be in an Earth-trailing orbit for astrophysics, Figure 2. Extended applications are envisioned for exo-solar planet interferometric imaging by a formation of very large separated optics telescopes, Figure 3. Space telescopes, with such large apertures and f/10 to f/100 optics, are not feasible if connected by massive metering structures. Instead, the new virtual-structure paradigm of information and control connectivity between the formation elements provides the necessary spatial rigidity and alignment precision for the telescope.

  19. A scatterometry inverse problem in optical mask metrology

    NASA Astrophysics Data System (ADS)

    Model, R.; Rathsfeld, A.; Gross, H.; Wurm, M.; Bodermann, B.

    2008-11-01

    We discuss the solution of the inverse problem in scatterometry i.e. the determination of periodic surface structures from light diffraction patterns. With decreasing details of lithography masks, increasing demands on metrology techniques arise. By scatterometry as a non-imaging indirect optical method critical dimensions (CD) like side-wall angles, heights, top and bottom widths are determined. The numerical simulation of diffraction is based on the finite element solution of the Helmholtz equation. The inverse problem seeks to reconstruct the grating geometry from measured diffraction patterns. The inverse operator maps efficiencies of diffracted plane wave modes to the grating parameters. We employ a Newton type iterative method to solve the resulting minimum problem. The reconstruction quality surely depends on the angles of incidence, on the wave lengths and/or the number of propagating scattered wave modes and will be discussed by numerical examples.

  20. Robust speckle metrology for stress measurements outside the lab

    NASA Astrophysics Data System (ADS)

    Viotti, Matias R.; Albertazzi G., Armando, Jr.

    2015-05-01

    Optical techniques are usually related to laboratory rooms, which are places equipped with temperature, humidity and vibration control. These techniques are very suitable for fast measurements due to their non-contact nature and full-field capability. Among them, optical methods based on the speckle phenomenon have had a great development during the last two decades because of the development of digital image processing, cameras, computers, lasers and optical components. Speckle techniques have the advantages cited for optical methods. Additionally, they are adequate for the evaluation of real components without further preparation of the surface and without high time consuming to be analyzed. This paper supplies tools, tips and reference parameters to develop interferometers based on the speckle phenomenon to be used outside the laboratory room. Finally, applications outside the lab for the measurement of mechanical and residual stresses are presented. These examples show the high potential of speckle metrology as an auxiliary tool for structure integrity assessment.

  1. Super-resolution PMD camera for applied metrology

    NASA Astrophysics Data System (ADS)

    Lietz, Henrik; Eberhardt, Jörg

    2016-03-01

    Currently, photonic mixing device (PMD) cameras undergo a great deal of attention. They allow simultaneous recordings of amplitude and distance images with one shot. This opens up new application possibilities like drivers' assistance in vehicles or gesture control in the multimedia sector. Unfortunately, PMD cameras reach only low spatial resolution. Wherein the pixel resolution for state-of-the-art indoor cameras ranging about VGA resolution, they are even lower for outdoor applications. This limits the possibilities for object recognition. From two-dimensional (2D) imaging there are already methods known for increasing spatial resolution virtually. It means resolution enhancement without changing physically given sensor specifications like pixel dimension or sensor size. In this context, often referred as superresolution (SR). This work compares four well-known geometric SR algorithms from 2D imaging adapted to PMD imaging. Resolution enhancement and quality of the SR results are evaluated objectively by measuring the spatial frequency response (SFR) and investigating the noise performance in amplitude and distance images. Based on these results, SR algorithms for possible measurement tasks in metrological or photographic applications are proposed.

  2. Optical metrology at the NSLS-II

    SciTech Connect

    Kaznatcheev, K.; Takacs, P. Z.

    2010-12-08

    Rapid progress in synchrotron optics performance places a high demand on optical characterization techniques used to validate surface parameters prior to installation of the X-ray optics. It is now necessary to characterize optical surface figure and slope errors and roughness on meter-long optics over spatial frequencies as short as 0.1 {micro}m The new NSLS-II Optical Metrology Laboratory (OML) includes instruments for measuring: (1) long spatial frequency figure errors with a ZYGO MST Fizeau-type 4* interferometer, capable of 0.1 nm sensitivity, (2) mid spatial frequencies with an upgraded ZYGO NewView 6300 white light interferometric microscope, capable of reaching 0.1 nm accuracy at a lateral resolution of 1 {micro}m, (3) high frequency roughness with an AFM (Nanosurf AG) with linearity better than 0.2% over the 80 {micro}m measurement area and sensitivity approaching 0.01 nm, and (4) slope errors with a long trace profiler currently under development that will be able to reach 50 nrad slope error accuracy. At present, the OML supports the NSLS-II R&D efforts and provides ongoing testing for NSLS optics. Future plans include the construction of a specialized metrology beamline for at-wavelength metrology, radiometry, in situ surface figuring, crystal optics characterization, and instrumentation development.

  3. Metrology Techniques for the Assembly of NCSX

    SciTech Connect

    C. Priniski, T. Dodson, M. Duco, S. Raftopoulos, R. Ellis, and A. Brooks

    2009-09-24

    In support of the National Compact Stellerator Experiment (NCSX), stellerator assembly activities continued this past year at the Princeton Plasma Physics Laboratory (PPPL) in partnership with the Oak Ridge National Laboratory (ORNL). The construction program saw the completion of the first two Half Field-Period Assemblies (HPA), each consisting of three modular coils. The full machine includes six such sub-assemblies. A single HPA consists of three of the NCSX modular coils wound and assembled at PPPL. These geometrically-complex threedimensional coils were wound using computer-aided metrology and CAD models to tolerances within +/- 0.5mm. The assembly of these coils required similar accuracy on a larger scale with the added complexity of more individual parts and fewer degrees of freedom for correction. Several new potential positioning issues developed for which measurement and control techniques were developed. To accomplish this, CAD coordinate-based computer metrology equipment and software similar to the solutions employed for winding the modular coils was used. Given the size of the assemblies, the primary tools were both interferometeraided and Absolute Distance Measurement (ADM)-only based laser trackers. In addition, portable Coordinate Measurement Machine (CMM) arms and some novel indirect measurement techniques were employed. This paper will detail both the use of CAD coordinate-based metrology technology and the techniques developed and employed for dimensional control of NSCX subassemblies. The results achieved and possible improvements to techniques will be discussed.

  4. Optical thin film metrology for optoelectronics

    NASA Astrophysics Data System (ADS)

    Petrik, Peter

    2012-12-01

    The manufacturing of optoelectronic thin films is of key importance, because it underpins a significant number of industries. The aim of the European joint research project for optoelectronic thin film characterization (IND07) in the European Metrology Research Programme of EURAMET is to develop optical and X-ray metrologies for the assessment of quality as well as key parameters of relevant materials and layer systems. This work is intended to be a step towards the establishment of validated reference metrologies for the reliable characterization, and the development of calibrated reference samples with well-defined and controlled parameters. In a recent comprehensive study (including XPS, AES, GD-OES, GD-MS, SNMS, SIMS, Raman, SE, RBS, ERDA, GIXRD), Abou-Ras et al. (Microscopy and Microanalysis 17 [2011] 728) demonstrated that most characterization techniques have limitations and bottle-necks, and the agreement of the measurement results in terms of accurate, absolute values is not as perfect as one would expect. This paper focuses on optical characterization techniques, laying emphasis on hardware and model development, which determine the kind and number of parameters that can be measured, as well as their accuracy. Some examples will be discussed including optical techniques and materials for photovoltaics, biosensors and waveguides.

  5. Quantitative optical metrology with CMOS cameras

    NASA Astrophysics Data System (ADS)

    Furlong, Cosme; Kolenovic, Ervin; Ferguson, Curtis F.

    2004-08-01

    Recent advances in laser technology, optical sensing, and computer processing of data, have lead to the development of advanced quantitative optical metrology techniques for high accuracy measurements of absolute shapes and deformations of objects. These techniques provide noninvasive, remote, and full field of view information about the objects of interest. The information obtained relates to changes in shape and/or size of the objects, characterizes anomalies, and provides tools to enhance fabrication processes. Factors that influence selection and applicability of an optical technique include the required sensitivity, accuracy, and precision that are necessary for a particular application. In this paper, sensitivity, accuracy, and precision characteristics in quantitative optical metrology techniques, and specifically in optoelectronic holography (OEH) based on CMOS cameras, are discussed. Sensitivity, accuracy, and precision are investigated with the aid of National Institute of Standards and Technology (NIST) traceable gauges, demonstrating the applicability of CMOS cameras in quantitative optical metrology techniques. It is shown that the advanced nature of CMOS technology can be applied to challenging engineering applications, including the study of rapidly evolving phenomena occurring in MEMS and micromechatronics.

  6. Metrology of 3D nanostructures.

    SciTech Connect

    Barsic, Anthony; Piestun, Rafael; Boye, Robert R.

    2012-10-01

    We propose a superresolution technique to resolve dense clusters of blinking emitters. The method relies on two basic assumptions: the emitters are statistically independent, and a model of the imaging system is known. We numerically analyze the performance limits of the method as a function of the emitter density and the noise level. Numerical simulations show that five closely packed emitters can be resolved and localized to a precision of 17nm. The experimental resolution of five quantum dots located within a diffraction limited spot confirms the applicability of this approach.

  7. Locating buildings in aerial photos

    NASA Technical Reports Server (NTRS)

    Green, James S.

    1994-01-01

    Algorithms and techniques for use in the identification and location of large buildings in digitized copies of aerial photographs are developed and tested. The building data would be used in the simulation of objects located in the vicinity of an airport that may be detected by aircraft radar. Two distinct approaches are considered. Most building footprints are rectangular in form. The first approach studied is to search for right-angled corners that characterize rectangular objects and then to connect these corners to complete the building. This problem is difficult because many nonbuilding objects, such as street corners, parking lots, and ballparks often have well defined corners which are often difficult to distinguish from rooftops. Furthermore, rooftops come in a number of shapes, sizes, shadings, and textures which also limit the discrimination task. The strategy used linear sequences of different samples to detect straight edge segments at multiple angles and to determine when these segments meet at approximately right-angles with respect to each other. This technique is effective in locating corners. The test image used has a fairly rectangular block pattern oriented about thirty degrees clockwise from a vertical alignment, and the overall measurement data reflect this. However, this technique does not discriminate between buildings and other objects at an operationally suitable rate. In addition, since multiple paths are tested for each image pixel, this is a time consuming task. The process can be speeded up by preprocessing the image to locate the more optimal sampling paths. The second approach is to rely on a human operator to identify and select the building objects and then to have the computer determine the outline and location of the selected structures. When presented with a copy of a digitized aerial photograph, the operator uses a mouse and cursor to select a target building. After a button on the mouse is pressed, with the cursor fully within

  8. High Resolution Urban Land Cover Mapping Using NAIP Aerial Photography and Image Processing for the USEPA National Atlas of Sustainability and Ecosystem Services

    NASA Astrophysics Data System (ADS)

    Pilant, A. N.; Baynes, J.; Dannenberg, M.

    2012-12-01

    The US EPA National Atlas for Sustainability is a web-based, easy-to-use, mapping application that allows users to view and analyze multiple ecosystem services in a specific region. The Atlas provides users with a visual method for interpreting ecosystem services and understanding how they can be conserved and enhanced for a sustainable future. The Urban Atlas component of the National Atlas will provide fine-scale information linking human health and well-being to environmental conditions such as urban heat islands, near-road pollution, resource use, access to recreation, drinking water quality and other quality of life indicators. The National Land Cover Data (NLCD) derived from 30 m scale 2006 Landsat imagery provides the land cover base for the Atlas. However, urban features and phenomena occur at finer spatial scales, so higher spatial resolution and more current LC maps are required. We used 4 band USDA NAIP imagery (1 m pixel size) and various classification approaches to produce urban land cover maps with these classes: impervious surface, grass and herbaceous, trees and forest, soil and barren, and water. Here we present the remote sensing methods used and results from four pilot cities in this effort, highlighting the pros and cons of the approach, and the benefits to sustainability and ecosystem services analysis. Example of high resolution land cover map derived from USDA NAIP aerial photo. Compare 30 m and 1 m resolution land cover maps of downtown Durham, NC.

  9. Gaps analysis for CD metrology beyond the 22nm node

    NASA Astrophysics Data System (ADS)

    Bunday, Benjamin; Germer, Thomas A.; Vartanian, Victor; Cordes, Aaron; Cepler, Aron; Settens, Charles

    2013-04-01

    This paper will examine the future for critical dimension (CD) metrology. First, we will present the extensive list of applications for which CD metrology solutions are needed, showing commonalities and differences among the various applications. We will then report on the expected technical limits of the metrology solutions currently being investigated by SEMATECH and others in the industry to address the metrology challenges of future nodes, including conventional CD scanning electron microscopy (CD-SEM) and optical critical dimension (OCD) metrology and new potential solutions such as He-ion microscopy (HeIM, sometimes elsewhere referred to as HIM), CD atomic force microscopy (CD-AFM), CD small-angle x-ray scattering (CD-SAXS), high-voltage scanning electron microscopy (HV-SEM), and other types. A technical gap analysis matrix will then be demonstrated, showing the current state of understanding of the future of the CD metrology space.

  10. Aerial views of the San Andreas Fault

    USGS Publications Warehouse

    Moore, M.

    1988-01-01

    These aerial photographs of the San Andreas fault were taken in 1965 by Robert E. Wallace of the U.S Geological Survey. The pictures were taken with a Rolliflex camera on 20 format black and white flim; Wallace was aboard a light, fixed-wing aircraft, flying mostly at low altitudes. He photographed the fault from San Francisco near its north end where it enters by the Salton Sea. These images represent only a sampling of the more than 300 images prodcued during this project. All the photographs reside in the U.S Geological Survey Library in Menlo Park, California. 

  11. Robust crack detection strategies for aerial inspection

    NASA Astrophysics Data System (ADS)

    Aldea, Emanuel; Le Hégarat, Sylvie

    2015-04-01

    In this work, we evaluate the relevance of current state of the art algorithms widely employed in the detection of cracks, for the specific context of aerial inspection, which is characterized by image quality degradation. In this study we focus on minimal cost path and on Marked Point Process algorithms, and we test their resilience to motion blur. The results show that the current strategies for defect detection are sensitive to the quality of input images; alternatively, we suggest some improvements based on a-contrario methods that are able to cope with significant motion blur.

  12. High speed nano-metrology

    SciTech Connect

    Humphris, Andrew D. L.; Zhao Bin; Catto, David; Kohli, Priyanka; Howard-Knight, Jeremy P.; Hobbs, Jamie K.

    2011-04-15

    For manufacturing at the nanometre scale a method for rapid and accurate measurement of the resultant functional devices is required. Although atomic force microscopy (AFM) has the requisite spatial resolution, it is severely limited in scan speed, the resolution and repeatability of vertical and lateral measurements being degraded when speed is increased. Here we present a new approach to AFM that makes a direct and feedback-independent measurement of surface height using a laser interferometer focused onto the back of the AFM tip. Combining this direct height measurement with a passive, feedback-free method for maintaining tip-sample contact removes the constraint on scan speed that comes from the bandwidth of the z-feedback loop. Conventional laser reflection detection is used for feedback control, which now plays the role of minimising tip-sample forces, rather than producing the sample topography. Using the system in conjunction with a rapid scanner, true height images are obtained with areas up to (36 x 36) {mu}m{sup 2} at 1 image/second, suitable for in-line applications.

  13. High-throughput parallel SPM for metrology, defect, and mask inspection

    NASA Astrophysics Data System (ADS)

    Sadeghian, H.; Herfst, R. W.; van den Dool, T. C.; Crowcombe, W. E.; Winters, J.; Kramer, G. F. I. J.

    2014-10-01

    Scanning probe microscopy (SPM) is a promising candidate for accurate assessment of metrology and defects on wafers and masks, however it has traditionally been too slow for high-throughput applications, although recent developments have significantly pushed the speed of SPM [1,2]. In this paper we present new results obtained with our previously presented high-throughput parallel SPM system [3,4] that showcase two key advances that are required for a successful deployment of SPM in high-throughput metrology, defect and mask inspection. The first is a very fast (up to 40 lines/s) image acquisition and a comparison of the image quality as function of speed. Secondly, a fast approach method: measurements of the scan-head approaching the sample from 0.2 and 1.0 mm distance in under 1.4 and 6 seconds respectively.

  14. Comparisons organized by Ionizing Radiation Metrology Laboratory of FTMC, Lithuania.

    PubMed

    Gudelis, A; Gorina, I

    2016-03-01

    The newly established Ionizing Radiation Metrology Laboratory of the National Metrology Institute (FTMC) in Lithuania organized four comparisons in the field of low-level radioactivity measurements in water. For gamma-ray emitters, the activity concentration in the samples was in the range 1-25Bq/kg, while for tritium it was around 2Bq/g. The assigned values of all comparisons were traceable to the primary standards of the Czech Metrology Institute (CMI). PMID:26585643

  15. Use of design pattern layout for automatic metrology recipe generation

    NASA Astrophysics Data System (ADS)

    Tabery, Cyrus; Page, Lorena

    2005-05-01

    As critical dimension control requirements become more challenging, due to complex designs, aggressive lithography, and the constant need to shrink,metrology recipe generation and design evaluation have also become very complex. Hundreds of unique sites must be measured and monitored to ensure good device performance and high yield. The use of the design and layout for automated metrology recipe generation will be critical to that challenge. The DesignGauge from Hitachi implements a system enabling arbitrary recipe generation and control of SEM observations performed on the wafer, based only on the design information. This concept for recipe generation can reduce the time to develop a technology node from RET and design rule selection, through OPC model calibration and verification, and all the way to high volume manufacturing. Conventional recipe creation for a large number of measurement targets requires a significant amount of engineering time. Often these recipes are used only once or twice during mask and process verification or OPC calibration data acquisition. This process of manual setup and analysis is also potentially error prone. CD-SEM recipe creation typically requires an actual wafer, so the recipe creation cannot occur until the scanner and reticle are in house. All of these problems with conventional CD SEM lead to increased development time and reduced final process quality. The new model of CD-SEM recipe generation and management utilizes design-to-SEM matching technology. This new technology extracts an idealized shape from the designed pattern, and utilizes the shape information for pattern matching. As a result, the designed pattern is used as basis for the template instead of the actual SEM image. Recipe creation can be achieved in a matter of seconds once the target site list is finalized. The sequence of steps for creating a recipe are: generate a target site list, pass the design polygons (GDS) and site list to the CD SEM, define references

  16. PREFACE: Fundamental Constants in Physics and Metrology

    NASA Astrophysics Data System (ADS)

    Klose, Volkmar; Kramer, Bernhard

    1986-01-01

    This volume contains the papers presented at the 70th PTB Seminar which, the second on the subject "Fundamental Constants in Physics and Metrology", was held at the Physikalisch-Technische Bundesanstalt in Braunschweig from October 21 to 22, 1985. About 100 participants from the universities and various research institutes of the Federal Republic of Germany participated in the meeting. Besides a number of review lectures on various broader subjects there was a poster session which contained a variety of topical contributed papers ranging from the theory of the quantum Hall effect to reports on the status of the metrological experiments at the PTB. In addition, the participants were also offered the possibility to visit the PTB laboratories during the course of the seminar. During the preparation of the meeting we noticed that even most of the general subjects which were going to be discussed in the lectures are of great importance in connection with metrological experiments and should be made accessible to the scientific community. This eventually resulted in the idea of the publication of the papers in a regular journal. We are grateful to the editor of Metrologia for providing this opportunity. We have included quite a number of papers from basic physical research. For example, certain aspects of high-energy physics and quantum optics, as well as the many-faceted role of Sommerfeld's fine-structure constant, are covered. We think that questions such as "What are the intrinsic fundamental parameters of nature?" or "What are we doing when we perform an experiment?" can shed new light on the art of metrology, and do, potentially, lead to new ideas. This appears to be especially necessary when we notice the increasing importance of the role of the fundamental constants and macroscopic quantum effects for the definition and the realization of the physical units. In some cases we have reached a point where the limitations of our knowledge of a fundamental constant and

  17. Aerial photography for sensing plant anomalies

    NASA Technical Reports Server (NTRS)

    Gausman, H. W.; Cardenas, R.; Hart, W. G.

    1970-01-01

    Changes in the red tonal response of Kodak Ektrachrome Infrared Aero 8443 film (EIR) are often incorrectly attributed solely to variations in infrared light reflectance of plant leaves, when the primary influence is a difference in visible light reflectance induced by varying chlorophyll contents. Comparisons are made among aerial photographic images of high- and low-chlorophyll foliage. New growth, foot rot, and boron and chloride nutrient toxicites produce low-chlorophyll foliage, and EIR transparency images of light red or white compared with dark-red images of high-chlorophyll foliage. Deposits of the sooty mold fungus that subsists on the honeydew produced by brown soft scale insects, obscure the citrus leaves' green color. Infected trees appear as black images on EIR film transparencies compared with red images of healthy trees.

  18. Automatic optimization of metrology sampling scheme for advanced process control

    NASA Astrophysics Data System (ADS)

    Chue, Chuei-Fu; Huang, Chun-Yen; Shih, Chiang-Lin

    2011-03-01

    In order to ensure long-term profitability, driving the operational costs down and improving the yield of a DRAM manufacturing process are continuous efforts. This includes optimal utilization of the capital equipment. The costs of metrology needed to ensure yield are contributing to the overall costs. As the shrinking of device dimensions continues, the costs of metrology are increasing because of the associated tightening of the on-product specifications requiring more metrology effort. The cost-of-ownership reduction is tackled by increasing the throughput and availability of metrology systems. However, this is not the only way to reduce metrology effort. In this paper, we discuss how the costs of metrology can be improved by optimizing the recipes in terms of the sampling layout, thereby eliminating metrology that does not contribute to yield. We discuss results of sampling scheme optimization for on-product overlay control of two DRAM manufacturing processes at Nanya Technology Corporation. For a 6x DRAM production process, we show that the reduction of metrology waste can be as high as 27% and overlay can be improved by 36%, comparing with a baseline sampling scheme. For a 4x DRAM process, having tighter overlay specs, a gain of ca. 0.5nm on-product overlay could be achieved, without increasing the metrology effort relative to the original sampling plan.

  19. D Surface Generation from Aerial Thermal Imagery

    NASA Astrophysics Data System (ADS)

    Khodaei, B.; Samadzadegan, F.; Dadras Javan, F.; Hasani, H.

    2015-12-01

    Aerial thermal imagery has been recently applied to quantitative analysis of several scenes. For the mapping purpose based on aerial thermal imagery, high accuracy photogrammetric process is necessary. However, due to low geometric resolution and low contrast of thermal imaging sensors, there are some challenges in precise 3D measurement of objects. In this paper the potential of thermal video in 3D surface generation is evaluated. In the pre-processing step, thermal camera is geometrically calibrated using a calibration grid based on emissivity differences between the background and the targets. Then, Digital Surface Model (DSM) generation from thermal video imagery is performed in four steps. Initially, frames are extracted from video, then tie points are generated by Scale-Invariant Feature Transform (SIFT) algorithm. Bundle adjustment is then applied and the camera position and orientation parameters are determined. Finally, multi-resolution dense image matching algorithm is used to create 3D point cloud of the scene. Potential of the proposed method is evaluated based on thermal imaging cover an industrial area. The thermal camera has 640×480 Uncooled Focal Plane Array (UFPA) sensor, equipped with a 25 mm lens which mounted in the Unmanned Aerial Vehicle (UAV). The obtained results show the comparable accuracy of 3D model generated based on thermal images with respect to DSM generated from visible images, however thermal based DSM is somehow smoother with lower level of texture. Comparing the generated DSM with the 9 measured GCPs in the area shows the Root Mean Square Error (RMSE) value is smaller than 5 decimetres in both X and Y directions and 1.6 meters for the Z direction.

  20. PREFACE: VII Brazilian Congress on Metrology (Metrologia 2013)

    NASA Astrophysics Data System (ADS)

    Costa-Félix, Rodrigo; Bernardes, Americo; Valente de Oliveira, José Carlos; Mauro Granjeiro, José; Epsztejn, Ruth; Ihlenfeld, Waldemar; Smarçaro da Cunha, Valnei

    2015-01-01

    SEVENTH BRAZILIAN CONGRESS ON METROLOGY (METROLOGIA 2013) Metrology and Quality for a Sustainable Development From November 24th to 27th 2013 was issued the Seventh Brazilian Congress on Metrology (Metrologia 2013), which is a biannual conference organized and sponsored by the Brazilian Society of Metrology (SBM) and the Brazilian National Institute of Metrology, Quality and Technology (Inmetro). This edition was held in the charming and historical city of Ouro Preto, MG, Brazil, and aimed to join people and institutions devoted to the dissemination of the metrology and conformity assessment. The Metrologia 2013 Conference consisted of Keynote Speeches (7) and regular papers (204). Among the regular papers, the 47 most outstanding ones, comprising a high quality content on Metrology and Conformity Assessment, were selected to be published in this issue of the Journal of Physics: Conference Series. The topics of the conference covered all important areas of Metrology, which were agglutinated in the following sessions in the present issue: . Physical Metrology (Acoustics, Vibration and Ultrasound; Electricity and Magnetism; Mechanics; Optics); . Metrology on Ionizing Radiations; . Time and Frequency; . Chemistry Metrology; . Materials Metrology; . Biotechnology; . Uncertainty, Statistics and Mathematics; . Legal Metrology; . Conformity Assessment. It is our great pleasure to present this volume of IOP Journal of Physics: Conference Series (JPCS) to the scientific community to promote further research in Metrology and related areas. We believe that this volume will be both an excellent source of scientific material in the fast evolving fields that were covered by Metrologia 2013. President of the congress Americo Bernardes Federal University of Ouro Preto atb@iceb.ufop.br Editor-in-chief Rodrigo Costa-Félix Brazilian National Institute of Metrology, Quality and Technology rpfelix@inmetro.gov.br Editors José Carlos Valente de Oliveira (Editor on Mechanical Metrology

  1. Infrared film for aerial photography

    USGS Publications Warehouse

    Anderson, William H.

    1979-01-01

    Considerable interest has developed recently in the use of aerial photographs for agricultural management. Even the simplest hand-held aerial photographs, especially those taken with color infrared film, often provide information not ordinarily available through routine ground observation. When fields are viewed from above, patterns and variations become more apparent, often allowing problems to be spotted which otherwise may go undetected.

  2. AERIAL PHOTOGRAPHY AND LEGAL APPLICATIONS

    EPA Science Inventory

    Aerial photographic interpretation is the process of examining objects on aerial photographs and determining their significance. t is often defined as both art and science because the process, and the quality of the derived information, is often a qualitative nature and much depe...

  3. 3D-profile measurement of advanced semiconductor features by reference metrology

    NASA Astrophysics Data System (ADS)

    Takamasu, Kiyoshi; Iwaki, Yuuki; Takahashi, Satoru; Kawada, Hiroki; Ikota, Masami; Lorusso, Gian F.; Horiguchi, Naoto

    2016-03-01

    A method of sub-nanometer uncertainty for the 3D-profile measurement using TEM (Transmission Electron Microscope) images is proposed to standardize 3D-profile measurement through reference metrology. The proposed method has been validated for profiles of Si lines, photoresist features and advanced-FinFET (Fin-shaped Field-Effect Transistor) features in our previous investigations. However, efficiency of 3D-profile measurement using TEM is limited by measurement time including processing of the sample. In this article, we demonstrate a novel on-wafer 3D-profile metrology as "FIB-to-CDSEM method" with FIB (Focused Ion Beam) slope cut and CD-SEM (Critical Dimension Secondary Electron Microscope) measuring. Using the method, a few micrometer wide on a wafer is coated and cut by 45 degree slope using FIB tool. Then, the wafer is transferred to CD-SEM to measure the cross section image by top down CD-SEM measurement. We apply FIB-to-CDSEM method to CMOS sensor device. 3D-profile and 3D-profile parameters such as top line width and side wall angles of CMOS sensor device are evaluated. The 3D-profile parameters also are measured by TEM images as reference metrology. We compare the 3D-profile parameters by TEM method and FIB-to-CDSEM method. The average values and correlations on the wafer are agreed well between TEM and FIB-to- CDSEM methods.

  4. Evaluation of the short-term sea cliff retreat along the Tróia-Sines Embayed Coast (Costa da Galé sector), using stereo digital aerial images and Bayesian inference

    NASA Astrophysics Data System (ADS)

    Gama, C.; Jalobeanu, A.

    2011-12-01

    Monitoring the sediment budget of coastal systems is essential to understand the costal equilibrium, and is an important aspect to be considered in coastal management. Thus, the identification and the quantitative evaluation of sedimentary sources and sinks are the first steps towards a better understanding of the dynamics of coastal morphology. The Tróia-Sines Embayed Coast (TSEC) in the southwest Portuguese coast corresponds to a continuous sandy beach that extends for approximately 65 km. It is limited at north by the Sado river estuary and at south by the Sines cape. Beaches are discontinuously limited landward by dunes (≈42 km) and by sea cliffs (≈18 km) made of poorly consolidated Plio-Plistocene detrital deposits. Cliff erosion by subaerial processes or gullying is a continuous phenomenon that contributes a significant amount of sediment to the TSEC coastal system, which is what we want to measure. Mainly due to winter rainfall, sea cliffs develop debris fans at the backshore inner limit, therefore we chose to make morphological measurements at one year interval. Thus, two series digital aerial images at 20 cm resolution were acquired in Oct 2008 and July 2009, supported by a collection of ground control points (GCP) to constrain the sensor orientation. Digital aerial stereo image pairs are used as main data source to reconstruct digital surface models (DSM). A new stereo photogrammetric method is used, based on dense disparity maps and Bayesian inference (Jalobeanu et al, 2010 and Jalobeanu, 2011). The originality of this method is in the computation of the spatial distribution of elevation errors in the DSM using stochastic modelling and probabilistic inference, which helps to detect the statistically significant changes in the estimated topography. The difference between the two generated DSMs is used to characterize the variability of the main subaerial beach morphodynamics parameters, such as: i) the alongshore beach configuration; ii) the beach

  5. Automatic Sea Bird Detection from High Resolution Aerial Imagery

    NASA Astrophysics Data System (ADS)

    Mader, S.; Grenzdörffer, G. J.

    2016-06-01

    Great efforts are presently taken in the scientific community to develop computerized and (fully) automated image processing methods allowing for an efficient and automatic monitoring of sea birds and marine mammals in ever-growing amounts of aerial imagery. Currently the major part of the processing, however, is still conducted by especially trained professionals, visually examining the images and detecting and classifying the requested subjects. This is a very tedious task, particularly when the rate of void images regularly exceeds the mark of 90%. In the content of this contribution we will present our work aiming to support the processing of aerial images by modern methods from the field of image processing. We will especially focus on the combination of local, region-based feature detection and piecewise global image segmentation for automatic detection of different sea bird species. Large image dimensions resulting from the use of medium and large-format digital cameras in aerial surveys inhibit the applicability of image processing methods based on global operations. In order to efficiently handle those image sizes and to nevertheless take advantage of globally operating segmentation algorithms, we will describe the combined usage of a simple performant feature detector based on local operations on the original image with a complex global segmentation algorithm operating on extracted sub-images. The resulting exact segmentation of possible candidates then serves as a basis for the determination of feature vectors for subsequent elimination of false candidates and for classification tasks.

  6. New method of 2-dimensional metrology using mask contouring

    NASA Astrophysics Data System (ADS)

    Matsuoka, Ryoichi; Yamagata, Yoshikazu; Sugiyama, Akiyuki; Toyoda, Yasutaka

    2008-10-01

    We have developed a new method of accurately profiling and measuring of a mask shape by utilizing a Mask CD-SEM. The method is intended to realize high accuracy, stability and reproducibility of the Mask CD-SEM adopting an edge detection algorithm as the key technology used in CD-SEM for high accuracy CD measurement. In comparison with a conventional image processing method for contour profiling, this edge detection method is possible to create the profiles with much higher accuracy which is comparable with CD-SEM for semiconductor device CD measurement. This method realizes two-dimensional metrology for refined pattern that had been difficult to measure conventionally by utilizing high precision contour profile. In this report, we will introduce the algorithm in general, the experimental results and the application in practice. As shrinkage of design rule for semiconductor device has further advanced, an aggressive OPC (Optical Proximity Correction) is indispensable in RET (Resolution Enhancement Technology). From the view point of DFM (Design for Manufacturability), a dramatic increase of data processing cost for advanced MDP (Mask Data Preparation) for instance and surge of mask making cost have become a big concern to the device manufacturers. This is to say, demands for quality is becoming strenuous because of enormous quantity of data growth with increasing of refined pattern on photo mask manufacture. In the result, massive amount of simulated error occurs on mask inspection that causes lengthening of mask production and inspection period, cost increasing, and long delivery time. In a sense, it is a trade-off between the high accuracy RET and the mask production cost, while it gives a significant impact on the semiconductor market centered around the mask business. To cope with the problem, we propose the best method of a DFM solution using two-dimensional metrology for refined pattern.

  7. Progress toward traceable nanoscale optical critical dimension metrology for semiconductors

    NASA Astrophysics Data System (ADS)

    Patrick, Heather J.; Germer, Thomas A.

    2007-09-01

    Non-imaging optical critical dimension (OCD) techniques have rapidly become a preferred method for measuring nanoscale features in semiconductors. OCD relies upon the measurement of an optical reflectance signature from a grating target as a function of angle, wavelength and/or polarization. By comparing the signature with theoretical simulations, parameters of the grating lines such as critical dimension (CD) linewidth, sidewall angle, and line height can be obtained. Although the method is sensitive and highly repeatable, there are many issues to be addressed before OCD can be considered a traceable metrology. We report on progress towards accurate, traceable measurement, modeling, and analysis of OCD signatures collected on the NIST goniometric optical scatter instrument (GOSI), focusing on recent results from grating targets fabricated using the single-crystal critical dimension reference materials (SCCDRM) process. While we demonstrate good correlation between linewidth extracted from OCD and that measured by scanning electron microscopy (SEM), we also find systematic deviations between the experimentally obtained optical signatures and best fit theoretical signatures that limit our ability to determine uncertainty in OCD linewidth. We then use the SCCDRM line profile model and a χ2 goodness-of-fit analysis on simulated signatures to demonstrate the theoretical confidence limits for the grating line parameters in the case of normally distributed noise. This analysis shows that for the current SCCDRM implementation, line height and oxide layer undercut are highly correlated parameters, and that the 3-σ confidence limits in extracted linewidth depend on the target pitch. Prospects for traceable OCD metrology will be discussed.

  8. Aerial thermography in archaeological prospection: Applications & processing

    NASA Astrophysics Data System (ADS)

    Cool, Autumn Chrysantha

    Aerial thermography is one of the least utilized archaeological prospection methods, yet it has great potential for detecting anthropogenic anomalies. Thermal infrared radiation is absorbed and reemitted at varying rates by all objects on and within the ground depending upon their density, composition, and moisture content. If an area containing archaeological features is recorded at the moment when their thermal signatures most strongly contrast with that of the surrounding matrix, they can be visually identified in thermal images. Research conducted in the 1960s and 1970s established a few basic rules for conducting thermal survey, but the expense associated with the method deterred most archaeologists from using this technology. Subsequent research was infrequent and almost exclusively appeared in the form of case studies. However, as the current proliferation of unmanned aerial vehicles (UAVs) and compact thermal cameras draws renewed attention to aerial thermography as an attractive and exciting form of survey, it is appropriate and necessary to reevaluate our approach. In this thesis I have taken a two-pronged approach. First, I built upon the groundwork of earlier researchers and created an experiment to explore the impact that different environmental and climatic conditions have on the success or failure of thermal imaging. I constructed a test site designed to mimic a range of archaeological features and imaged it under a variety of conditions to compare and contrast the results. Second, I explored a new method for processing thermal data that I hope will lead to a means of reducing noise and increasing the clarity of thermal images. This step was done as part of a case study so that the effectiveness of the processing method could be evaluated by comparison with the results of other geophysical surveys.

  9. Metrology for graphene and 2D materials

    NASA Astrophysics Data System (ADS)

    Pollard, Andrew J.

    2016-09-01

    The application of graphene, a one atom-thick honeycomb lattice of carbon atoms with superlative properties, such as electrical conductivity, thermal conductivity and strength, has already shown that it can be used to benefit metrology itself as a new quantum standard for resistance. However, there are many application areas where graphene and other 2D materials, such as molybdenum disulphide (MoS2) and hexagonal boron nitride (h-BN), may be disruptive, areas such as flexible electronics, nanocomposites, sensing and energy storage. Applying metrology to the area of graphene is now critical to enable the new, emerging global graphene commercial world and bridge the gap between academia and industry. Measurement capabilities and expertise in a wide range of scientific areas are required to address this challenge. The combined and complementary approach of varied characterisation methods for structural, chemical, electrical and other properties, will allow the real-world issues of commercialising graphene and other 2D materials to be addressed. Here, examples of metrology challenges that have been overcome through a multi-technique or new approach are discussed. Firstly, the structural characterisation of defects in both graphene and MoS2 via Raman spectroscopy is described, and how nanoscale mapping of vacancy defects in graphene is also possible using tip-enhanced Raman spectroscopy (TERS). Furthermore, the chemical characterisation and removal of polymer residue on chemical vapour deposition (CVD) grown graphene via secondary ion mass spectrometry (SIMS) is detailed, as well as the chemical characterisation of iron films used to grow large domain single-layer h-BN through CVD growth, revealing how contamination of the substrate itself plays a role in the resulting h-BN layer. In addition, the role of international standardisation in this area is described, outlining the current work ongoing in both the International Organization of Standardization (ISO) and the

  10. 1:500 Scale Aerial Triangulation Test with Unmanned Airship in Hubei Province

    NASA Astrophysics Data System (ADS)

    Feifei, Xie; Zongjian, Lin; Dezhu, Gui

    2014-03-01

    A new UAVS (Unmanned Aerial Vehicle System) for low altitude aerial photogrammetry is introduced for fine surveying and mapping, including the platform airship, sensor system four-combined wide-angle camera and photogrammetry software MAP-AT. It is demonstrated that this low-altitude aerial photogrammetric system meets the precision requirements of 1:500 scale aerial triangulation based on the test of this system in Hubei province, including the working condition of the airship, the quality of image data and the data processing report. This work provides a possibility for fine surveying and mapping.

  11. Metrologies for the Phase Characterization of Attosecond

    SciTech Connect

    CXRO; Mccall, Monnikue M; Aquila, Andrew; Salmassi, Farhad; Gullikson, Eric

    2008-01-17

    EUV optics play a key role in attosecond science since only with higher photon energies is it possible to achieve the wide spectral bandwidth required for ultrashort pulses. Multilayer EUV mirrors have been proposed and are being developed to temporally shape (compress) attosecond pulses. To fully characterize a multilayer optic for pulse applications requires not only knowledge of the reflectivity, as a function of photon energy, but also the reflected phase of the mirror. This work develops the metrologies to determine the reflected phase of an EUV multilayer mirror using the photoelectric effect. The proposed method allows one to determine the optic's impulse response and hence its pulse characteristics.

  12. [The metrological support of medical laboratory activity].

    PubMed

    Émanuél', A V; Suvorov, V I; Evseenko, O V

    2013-02-01

    The article discusses the methodological approaches in implementing of regulations of the Federal law FZ-102 "On the support of unity of measurements in the area of laboratory medicine "from the positions of GOSTK ISO 9001-2008 "The systems of quality management. Requirements" and GOST K ISO 15189-2009 "medical laboratories. The particular requirements to quality and competence". The application of GOSTK ISO 18113.1-5 "The medicine items for diagnostic in vitro. Information provided by manufacturer (marking)" neatly assigns the responsibility for support of metrological correctness of laboratory measurements. PMID:23808011

  13. CD SEM metrology macro CD technology: beyond the average

    NASA Astrophysics Data System (ADS)

    Bunday, Benjamin D.; Michelson, Di K.; Allgair, John A.; Tam, Aviram; Chase-Colin, David; Dajczman, Asaf; Adan, Ofer; Har-Zvi, Michael

    2005-05-01

    Downscaling of semiconductor fabrication technology requires an ever-tighter control of the production process. CD-SEM, being the major image-based critical dimension metrology tool, is constantly being improved in order to fulfill these requirements. One of the methods used for increasing precision is averaging over several or many (ideally identical) features, usually referred to as "Macro CD". In this paper, we show that there is much more to Macro CD technology- metrics characterizing an arbitrary array of similar features within a single SEM image-than just the average. A large amount of data is accumulated from a single scan of a SEM image, providing informative and statistically valid local process characterization. As opposed to other technologies, Macro CD not only provides extremely precise average metrics, but also allows for the reporting of full information on each of the measured features and of various statistics (such as the variability) on all currently reported CD SEM metrics. We present the mathematical background behind Macro CD technology and the opportunity for reducing number of sites for SPC, along with providing enhanced-sensitivity CD metrics.

  14. Virtual overlay metrology for fault detection supported with integrated metrology and machine learning

    NASA Astrophysics Data System (ADS)

    Lee, Hong-Goo; Schmitt-Weaver, Emil; Kim, Min-Suk; Han, Sang-Jun; Kim, Myoung-Soo; Kwon, Won-Taik; Park, Sung-Ki; Ryan, Kevin; Theeuwes, Thomas; Sun, Kyu-Tae; Lim, Young-Wan; Slotboom, Daan; Kubis, Michael; Staecker, Jens

    2015-03-01

    While semiconductor manufacturing moves toward the 7nm node for logic and 15nm node for memory, an increased emphasis has been placed on reducing the influence known contributors have toward the on product overlay budget. With a machine learning technique known as function approximation, we use a neural network to gain insight to how known contributors, such as those collected with scanner metrology, influence the on product overlay budget. The result is a sufficiently trained function that can approximate overlay for all wafers exposed with the lithography system. As a real world application, inline metrology can be used to measure overlay for a few wafers while using the trained function to approximate overlay vector maps for the entire lot of wafers. With the approximated overlay vector maps for all wafers coming off the track, a process engineer can redirect wafers or lots with overlay signatures outside the standard population to offline metrology for excursion validation. With this added flexibility, engineers will be given more opportunities to catch wafers that need to be reworked, resulting in improved yield. The quality of the derived corrections from measured overlay metrology feedback can be improved using the approximated overlay to trigger, which wafers should or shouldn't be, measured inline. As a development or integration engineer the approximated overlay can be used to gain insight into lots and wafers used for design of experiments (DOE) troubleshooting. In this paper we will present the results of a case study that follows the machine learning function approximation approach to data analysis, with production overlay measured on an inline metrology system at SK hynix.

  15. AERIAL MEASURING SYSTEM IN JAPAN

    SciTech Connect

    Lyons, Craig; Colton, David

    2012-01-01

    The U.S. Department of Energy National Nuclear Security Agency’s Aerial Measuring System deployed personnel and equipment to partner with the U.S. Air Force in Japan to conduct multiple aerial radiological surveys. These were the first and most comprehensive sources of actionable information for U.S. interests in Japan and provided early confirmation to the government of Japan as to the extent of the release from the Fukushima Daiichi Nuclear Power Generation Station. Many challenges were overcome quickly during the first 48 hours; including installation and operation of Aerial Measuring System equipment on multiple U.S. Air Force Japan aircraft, flying over difficult terrain, and flying with talented pilots who were unfamiliar with the Aerial Measuring System flight patterns. These all combined to make for a dynamic and non-textbook situation. In addition, the data challenges of the multiple and on-going releases, and integration with the Japanese government to provide valid aerial radiological survey products that both military and civilian customers could use to make informed decisions, was extremely complicated. The Aerial Measuring System Fukushima response provided insight in addressing these challenges and gave way to an opportunity for the expansion of the Aerial Measuring System’s mission beyond the borders of the US.

  16. Aerial thermography for energy conservation

    NASA Technical Reports Server (NTRS)

    Jack, J. R.

    1978-01-01

    Thermal infrared scanning from an aircraft is a convenient and commercially available means for determining relative rates of energy loss from building roofs. The need to conserve energy as fuel costs makes the mass survey capability of aerial thermography an attractive adjunct to community energy awareness programs. Background information on principles of aerial thermography is presented. Thermal infrared scanning systems, flight and environmental requirements for data acquisition, preparation of thermographs for display, major users and suppliers of thermography, and suggested specifications for obtaining aerial scanning services were reviewed.

  17. Superpolishing and Precision Metrology on a Metal Mandrel and Replicated Segments for Constellation-X

    NASA Technical Reports Server (NTRS)

    Content, D.; Lyons, J.; Saha, T.; Wright, G.; Zaniewski, J.; Petre, R.; Chan, K. W.

    1999-01-01

    We have superpolished a diamond-turned aluminum mandrel (coated with electroless Ni) to an axial roughness of 0.34 nm rms. The mandrel is made to the Astro-E secondary mirror design for the 81st shell. Precision metrology at 100 mm to submicron scales has established the power spectral density of the mandrel and ultralightweight gold coated replicated segments. Predicted image quality of a set of optimally aligned replicated segments of this and a matching primary is substantially improved as compared to the flight mirrors for Astro-E. This approach using metal mandrels, superpolishing, and replicated ultralightweight foil mirrors, may represent a cost-effective approach to meeting the 15 arcsec half-energy width and weight requirements for the Constellation-X mission. Descriptions of the polishing apparatus, the precision metrology instruments, and the surface data analysis are presented. The general methods described are applicable to precision optics for both normal incidence and grazing incidence optics.

  18. Superpolishing and Precision Metrology on a Metal Mandrel and Replicated Segments for Constellation-X

    NASA Technical Reports Server (NTRS)

    Content, D.; Saha, T.; Petre, R.; Lyons, J. J., III; Wright, G.; Zaniewski, J.; Chan, K. W.

    1999-01-01

    We have superpolished a diamond-turned aluminum mandrel (coated with electroless Ni) to an axial roughness of 6.34 nm rms. The mandrel is made to the Astro-E secondary mirror design for the 81st shell. Precision metrology at 100 mm to submicron scales has established the power spectral density of the mandrel and ultralightweight gold coated replicated segments. Predicted image quality of a set of optimally aligned replicated segments of this and a matching primary is substantially improved as compared to the flight mirrors for Astro-E. This approach using metal mandrels, superpolishing, and replicated ultralightweight foil mirrors, may represent a cost-effective approach to meeting the 15 arcsec half-energy width and weight requirements for the Constellation-X mission. Descriptions of the polishing apparatus, the precision metrology instruments, and the surface data analysis are presented. The general methods described are applicable to precision optics for both normal incidence and grazing incidence optics.

  19. Observations on the Performance of X-Ray Computed Tomography for Dimensional Metrology

    NASA Astrophysics Data System (ADS)

    Corcoran, H. C.; Brown, S. B.; Robson, S.; Speller, R. D.; McCarthy, M. B.

    2016-06-01

    X-ray computed tomography (XCT) is a rising technology within many industries and sectors with a demand for dimensional metrology, defect, void analysis and reverse engineering. There are many variables that can affect the dimensional metrology of objects imaged using XCT, this paper focusses on the effects of beam hardening due to the orientation of the workpiece, in this case a holeplate, and the volume of material the X-rays travel through. Measurements discussed include unidirectional and bidirectional dimensions, radii of cylinders, fit point deviations of the fitted shapes and cylindricity. Results indicate that accuracy and precision of these dimensional measurements are affected in varying amounts, both by the amount of material the X-rays have travelled through and the orientation of the object.

  20. Observation of a Large Landslide on La Reunion Island Using Differential Sar Interferometry (JERS and Radarsat) and Correlation of Optical (Spot5 and Aerial) Images.

    PubMed

    Delacourt, Christophe; Raucoules, Daniel; Le Mouélic, Stéphane; Carnec, Claudie; Feurer, Denis; Allemand, Pascal; Cruchet, Marc

    2009-01-01

    Slope instabilities are one of the most important geo-hazards in terms of socio-economic costs. The island of La Réunion (Indian Ocean) is affected by constant slope movements and huge landslides due to a combination of rough topography, wet tropical climate and its specific geological context. We show that remote sensing techniques (Differential SAR Interferometry and correlation of optical images) provide complementary means to characterize landslides on a regional scale. The vegetation cover generally hampers the analysis of C-band interferograms. We used JERS-1 images to show that the L-band can be used to overcome the loss of coherence observed in Radarsat C-band interferograms. Image correlation was applied to optical airborne and SPOT 5 sensors images. The two techniques were applied to a landslide near the town of Hellbourg in order to assess their performance for detecting and quantifying the ground motion associated to this landslide. They allowed the mapping of the unstable areas. Ground displacement of about 0.5 m yr(-1) was measured. PMID:22389620

  1. Observation of a Large Landslide on La Reunion Island Using Differential Sar Interferometry (JERS and Radarsat) and Correlation of Optical (Spot5 and Aerial) Images

    PubMed Central

    Delacourt, Christophe; Raucoules, Daniel; Le Mouélic, Stéphane; Carnec, Claudie; Feurer, Denis; Allemand, Pascal; Cruchet, Marc

    2009-01-01

    Slope instabilities are one of the most important geo-hazards in terms of socio-economic costs. The island of La Réunion (Indian Ocean) is affected by constant slope movements and huge landslides due to a combination of rough topography, wet tropical climate and its specific geological context. We show that remote sensing techniques (Differential SAR Interferometry and correlation of optical images) provide complementary means to characterize landslides on a regional scale. The vegetation cover generally hampers the analysis of C–band interferograms. We used JERS-1 images to show that the L-band can be used to overcome the loss of coherence observed in Radarsat C-band interferograms. Image correlation was applied to optical airborne and SPOT 5 sensors images. The two techniques were applied to a landslide near the town of Hellbourg in order to assess their performance for detecting and quantifying the ground motion associated to this landslide. They allowed the mapping of the unstable areas. Ground displacement of about 0.5 m yr-1 was measured. PMID:22389620

  2. Quantum metrology with imperfect states and detectors

    SciTech Connect

    Datta, Animesh; Zhang Lijian; Thomas-Peter, Nicholas; Smith, Brian J.; Walmsley, Ian A.; Dorner, Uwe

    2011-06-15

    Quantum enhancements of precision in metrology can be compromised by system imperfections. These may be mitigated by appropriate optimization of the input state to render it robust, at the expense of making the state difficult to prepare. In this paper, we identify the major sources of imperfection of an optical sensor: input state preparation inefficiency, sensor losses, and detector inefficiency. The second of these has received much attention; we show that it is the least damaging to surpassing the standard quantum limit in a optical interferometric sensor. Further, we show that photonic states that can be prepared in the laboratory using feasible resources allow a measurement strategy using photon-number-resolving detectors that not only attain the Heisenberg limit for phase estimation in the absence of losses, but also deliver close to the maximum possible precision in realistic scenarios including losses and inefficiencies. In particular, we give bounds for the tradeoff between the three sources of imperfection that will allow true quantum-enhanced optical metrology

  3. A metrology solution for the orthopaedic industry

    NASA Astrophysics Data System (ADS)

    Bills, P.; Brown, L.; Jiang, X.; Blunt, L.

    2005-01-01

    Total joint replacement is one of the most common elective surgical procedures performed worldwide, with an estimate of 1.5 million operations performed annually. Currently joint replacements are expected to function for 10-15 years, however, with an increase in life expectancy, and a greater call for knee replacement due to increased activity levels, there is a requirement to improve their function to offer longer term improved quality of life for patients. The amount of wear that a joint incurs is seen as a good indicator of performance, with higher wear rates typically leading to reduced function and premature failure. New technologies and materials are pushing traditional wear assessment methods to their limits, and novel metrology solutions are required to assess wear of joints following in vivo and in vitro use. This paper presents one such measurement technique; a scanning co-ordinate metrology machine for geometrical assessment. A case study is presented to show the application of this technology to a real orthopaedic measurement problem: the wear of components in total knee replacement. This technique shows good results and provides a basis for further developing techniques for geometrical wear assessment of total joint replacements.

  4. Quantum metrology with unitary parametrization processes

    PubMed Central

    Liu, Jing; Jing, Xiao-Xing; Wang, Xiaoguang

    2015-01-01

    Quantum Fisher information is a central quantity in quantum metrology. We discuss an alternative representation of quantum Fisher information for unitary parametrization processes. In this representation, all information of parametrization transformation, i.e., the entire dynamical information, is totally involved in a Hermitian operator . Utilizing this representation, quantum Fisher information is only determined by and the initial state. Furthermore, can be expressed in an expanded form. The highlights of this form is that it can bring great convenience during the calculation for the Hamiltonians owning recursive commutations with their partial derivative. We apply this representation in a collective spin system and show the specific expression of . For a simple case, a spin-half system, the quantum Fisher information is given and the optimal states to access maximum quantum Fisher information are found. Moreover, for an exponential form initial state, an analytical expression of quantum Fisher information by operator is provided. The multiparameter quantum metrology is also considered and discussed utilizing this representation. PMID:25708678

  5. METROLOGICAL CHALLENGES OF SYNCHROTRON RADIATION OPTICS.

    SciTech Connect

    SOSTERO,G.

    1999-05-25

    Modern third generation storage rings, require state-of-the-art grazing incidence x-ray optics, in order to monochromate the Synchrotrons Radiation (SR) source photons, and focus them into the experimental stations. Slope error tolerances in the order of 0.5 {micro}Rad RMS, and surface roughness well below 5 {angstrom} RMS, are frequently specified for mirrors and gratings exceeding 300 mm in length. Non-contact scanning instruments were developed, in order to characterize SR optical surfaces, of spherical and aspherical shape. Among these, the Long Trace Profiler (LTP), a double pencil slope measuring interferometer, has proved to be particularly reliable, and was adopted by several SR optics metrology laboratories. The ELETTRA soft x-rays and optics metrology laboratory, has operated an LTP since 1992. We review the basic operating principles of this instrument, and some major instrumental and environmental improvements, that were developed in order to detect slope errors lower than 1 {micro}Rad RMS on optical surfaces up to one metre in length. A comparison among measurements made on the same reference flat, by different interferometers (most of them were LTPs) can give some helpful indications in order to optimize the quality of measurement.

  6. Optical vernier interferometry for aspheric metrology

    NASA Astrophysics Data System (ADS)

    Murphy, Paul E.; Brown, Thomas G.; Moore, Duncan T.

    1999-06-01

    The ease of manufacture and testing spherical optical surfaces has made them the default choice for optical systems. Optical designs could greatly benefit form aspheric surfaces; the use of aspherics for projection photolithography in particular puts increasingly greater demands on optical manufacturing. Extreme UV (EUV) lithography requires all reflective elements, some of which will likely be strong aspheres. Modeling software and manufacturing have outpaced aspheric metrology, and we must be able to measure an optical component to have any hope of fabricating it. We seek to extend the dynamic range of optical interferometry to include aspheric surface metrology. We employ two wavelengths to create a vernier effect, allowing the measurement of larger departures without fundamentally sacrificing measurement accuracy. Such large departures impose more rigorous specifications on the interferometer. We explain the new challenges in the acquisition and interpretation of aspheric surface data, and compare to conventional spherical testing. The interferometer optical components are modeled using OSLO SIX design tools. Preliminary experimental results confirm the theory of operation. Some obstacles to practical implementation were also observed, and will be addressed.

  7. Optics for Processes, Products and Metrology

    NASA Astrophysics Data System (ADS)

    Mather, George

    1999-04-01

    Optical physics has a variety of applications in industry, including process inspection, coatings development, vision instrumentation, spectroscopy, and many others. Optics has been used extensively in the design of solar energy collection systems and coatings, for example. Also, with the availability of good CCD cameras and fast computers, it has become possible to develop real-time inspection and metrology devices that can accommodate the high throughputs encountered in modern production processes. More recently, developments in moiré interferometry show great promise for applications in the basic metals and electronics industries. The talk will illustrate applications of optics by discussing process inspection techniques for defect detection, part dimensioning, birefringence measurement, and the analysis of optical coatings in the automotive, glass, and optical disc industries. In particular, examples of optical techniques for the quality control of CD-R, MO, and CD-RW discs will be presented. In addition, the application of optical concepts to solar energy collector design and to metrology by moiré techniques will be discussed. Finally, some of the modern techniques and instruments used for qualitative and quantitative material analysis will be presented.

  8. Reference data sets for testing metrology software

    NASA Astrophysics Data System (ADS)

    Kok, G. J. P.; Harris, P. M.; Smith, I. M.; Forbes, A. B.

    2016-08-01

    Many fields of metrology rely on calculations that are implemented in software. When such software is used to provide a measurement result, which is required to be traceable, it is necessary to recognise explicitly the software and show it to be operating correctly. An approach to testing the performance of calculation software is based on using reference pairs each of which comprises reference input data applied as input to the software and corresponding reference output data against which the output data of the software is compared. However, to make the reference pair useful for verifying and validating calculation software, information is needed about the numerical accuracy of the reference pair, the numerical sensitivity of the reference output data to perturbations in the reference input data, and the measurement uncertainty associated with the reference output data arising from simulated measurement uncertainty associated with the reference input data. Such information is important as a means to express quantitatively the quality of the reference pair as a numerical artefact to test calculation software, and as a basis for performance metrics to express quantitatively the numerical performance of software. In this paper these additional components of a reference data set are described, and various approaches to calculating them are discussed. An example, concerned with the calculation of the Gaussian (least-squares) best-fit plane to measured data, which is typical of calculations undertaken in coordinate metrology, is used to illustrate the ideas presented.

  9. A new approach on restoration of dynamic measurement uncertainties in optical precision coordinate metrology

    NASA Astrophysics Data System (ADS)

    Holder, S.; Reetz, E.; Linß, G.

    2015-02-01

    This paper presents a new approach to the restoration of dynamic influenced measurement uncertainties in optical precision coordinate metrology (OPCM) using image sensors to measure geometrical features. Dynamic measurements within the context of this paper are based upon relative motion between the imaging setup (CCD-camera and optical system) and the measuring object respectively the measuring scene. The dynamic image acquisition causes image motion blur effects, which downgrades the uncertainties of the measurand. The approach presented deals with a new technique to restore motion degraded images using different methods to analyze important image features by extending the famous state of the art Richardson-Lucy image restoration technique using a new convergence criteria based on the variation of the detectable sub-pixel edge position of each iteration.

  10. Modeling aerial refueling operations

    NASA Astrophysics Data System (ADS)

    McCoy, Allen B., III

    Aerial Refueling (AR) is the act of offloading fuel from one aircraft (the tanker) to another aircraft (the receiver) in mid flight. Meetings between tanker and receiver aircraft are referred to as AR events and are scheduled to: escort one or more receivers across a large body of water; refuel one or more receivers; or train receiver pilots, tanker pilots, and boom operators. In order to efficiently execute the Aerial Refueling Mission, the Air Mobility Command (AMC) of the United States Air Force (USAF) depends on computer models to help it make tanker basing decisions, plan tanker sorties, schedule aircraft, develop new organizational doctrines, and influence policy. We have worked on three projects that have helped AMC improve its modeling and decision making capabilities. Optimal Flight Planning. Currently Air Mobility simulation and optimization software packages depend on algorithms which iterate over three dimensional fuel flow tables to compute aircraft fuel consumption under changing flight conditions. When a high degree of fidelity is required, these algorithms use a large amount of memory and CPU time. We have modeled the rate of aircraft fuel consumption with respect to AC GrossWeight, Altitude and Airspeed. When implemented, this formula will decrease the amount of memory and CPU time needed to compute sortie fuel costs and cargo capacity values. We have also shown how this formula can be used in optimal control problems to find minimum costs flight plans. Tanker Basing Demand Mismatch Index. Since 1992, AMC has relied on a Tanker Basing/AR Demand Mismatch Index which aggregates tanker capacity and AR demand data into six regions. This index was criticized because there were large gradients along regional boundaries. Meanwhile tankers frequently cross regional boundaries to satisfy the demand for AR support. In response we developed continuous functions to score locations with respect to their proximity to demand for AR support as well as their

  11. Metrological reliability of optical coherence tomography in biomedical applications

    NASA Astrophysics Data System (ADS)

    Goloni, C. M.; Temporão, G. P.; Monteiro, E. C.

    2013-09-01

    Optical coherence tomography (OCT) has been proving to be an efficient diagnostics technique for imaging in vivo tissues, an optical biopsy with important perspectives as a diagnostic tool for quantitative characterization of tissue structures. Despite its established clinical use, there is no international standard to address the specific requirements for basic safety and essential performance of OCT devices for biomedical imaging. The present work studies the parameters necessary for conformity assessment of optoelectronics equipment used in biomedical applications like Laser, Intense Pulsed Light (IPL), and OCT, targeting to identify the potential requirements to be considered in the case of a future development of a particular standard for OCT equipment. In addition to some of the particular requirements standards for laser and IPL, also applicable for metrological reliability analysis of OCT equipment, specific parameters for OCT's evaluation have been identified, considering its biomedical application. For each parameter identified, its information on the accompanying documents and/or its measurement has been recommended. Among the parameters for which the measurement requirement was recommended, including the uncertainty evaluation, the following are highlighted: optical radiation output, axial and transverse resolution, pulse duration and interval, and beam divergence.

  12. Use of archive aerial photography for monitoring black mangrove populations

    Technology Transfer Automated Retrieval System (TEKTRAN)

    A study was conducted on the south Texas Gulf Coast to evaluate archive aerial color-infrared (CIR) photography combined with supervised image analysis techniques to quantify changes in black mangrove [Avicennia germinans (L.) L.] populations over a 26-year period. Archive CIR film from two study si...

  13. High throughput phenotyping using an unmanned aerial vehicle

    Technology Transfer Automated Retrieval System (TEKTRAN)

    Field trials are expensive and labor-intensive to carry out. Strategies to maximize data collection from these trials will improve research efficiencies. We have purchased a small unmanned aerial vehicle (AEV) to collect digital images from field plots. The AEV is remote-controlled and can be guided...

  14. Development of an airborne remote sensing system for aerial applicators

    Technology Transfer Automated Retrieval System (TEKTRAN)

    An airborne remote sensing system was developed and tested for recording aerial images of field crops, which were analyzed for variations of crop health or pest infestation. The multicomponent system consists of a multi-spectral camera system, a camera control system, and a radiometer for normalizi...

  15. Investigations into mirror fabrication metrology analysis

    NASA Technical Reports Server (NTRS)

    Dimmock, John O.

    1994-01-01

    This final report describes the work performed under this delivery order from June 1993 through August 1994. The scope of work included three distinct tasks in support of the AXAF-I program. The objective of the first task was to perform investigations of the grinding and polishing characteristics of the zerodur material by fabricating several samples. The second task was to continue the development of the integrated optical performance modeling software for AXAF-I. The purpose of third and final task was to develop and update the database of AXAF technical documents for an easy and rapid access. The MSFC optical and metrology shops were relocated from the B-wing of Building 4487 to Room BC 144 of Building 4466 in the beginning of this contract. This included dismantling, packing, and moving the equipment from its old location, and then reassembling it at the new location. A total of 65 zerodur samples, measuring 1 inch x 2 inches x 6 inches were ground and polished to a surface figure of lambda/10 p-v, and a surface finish of 5A rms were fabricated for coating tests. A number of special purpose tools and metal mirrors were also fabricated to support various AXAF-I development activities. In the metrology area, the ZYGO Mark 4 interferometer was relocated and also upgraded with a faster and more powerful processor. Surface metrology work was also performed on the coating samples and other optics using ZYGO interferometer and WYKO profilometer. A number of new features have been added to the GRAZTRACE program to enhance its analysis and modeling capabilities. A number of new commands have been added to the command mode GRAZTRACE program to provide a better control to the user on the program execution and data manipulation. Some commands and parameter entries have been reorganized for a uniform format. The command mode version of the convolution program CONVOLVE has been developed. An on-line help system and a user's manual have also been developed for the benefit of

  16. Investigations into mirror fabrication metrology analysis

    NASA Astrophysics Data System (ADS)

    Dimmock, John O.

    1994-08-01

    This final report describes the work performed under this delivery order from June 1993 through August 1994. The scope of work included three distinct tasks in support of the AXAF-I program. The objective of the first task was to perform investigations of the grinding and polishing characteristics of the zerodur material by fabricating several samples. The second task was to continue the development of the integrated optical performance modeling software for AXAF-I. The purpose of third and final task was to develop and update the database of AXAF technical documents for an easy and rapid access. The MSFC optical and metrology shops were relocated from the B-wing of Building 4487 to Room BC 144 of Building 4466 in the beginning of this contract. This included dismantling, packing, and moving the equipment from its old location, and then reassembling it at the new location. A total of 65 zerodur samples, measuring 1 inch x 2 inches x 6 inches were ground and polished to a surface figure of lambda/10 p-v, and a surface finish of 5A rms were fabricated for coating tests. A number of special purpose tools and metal mirrors were also fabricated to support various AXAF-I development activities. In the metrology area, the ZYGO Mark 4 interferometer was relocated and also upgraded with a faster and more powerful processor. Surface metrology work was also performed on the coating samples and other optics using ZYGO interferometer and WYKO profilometer. A number of new features have been added to the GRAZTRACE program to enhance its analysis and modeling capabilities. A number of new commands have been added to the command mode GRAZTRACE program to provide a better control to the user on the program execution and data manipulation. Some commands and parameter entries have been reorganized for a uniform format. The command mode version of the convolution program CONVOLVE has been developed. An on-line help system and a user's manual have also been developed for the benefit of

  17. Analysis of key technologies for virtual instruments metrology

    NASA Astrophysics Data System (ADS)

    Liu, Guixiong; Xu, Qingui; Gao, Furong; Guan, Qiuju; Fang, Qiang

    2008-12-01

    Virtual instruments (VIs) require metrological verification when applied as measuring instruments. Owing to the software-centered architecture, metrological evaluation of VIs includes two aspects: measurement functions and software characteristics. Complexity of software imposes difficulties on metrological testing of VIs. Key approaches and technologies for metrology evaluation of virtual instruments are investigated and analyzed in this paper. The principal issue is evaluation of measurement uncertainty. The nature and regularity of measurement uncertainty caused by software and algorithms can be evaluated by modeling, simulation, analysis, testing and statistics with support of powerful computing capability of PC. Another concern is evaluation of software features like correctness, reliability, stability, security and real-time of VIs. Technologies from software engineering, software testing and computer security domain can be used for these purposes. For example, a variety of black-box testing, white-box testing and modeling approaches can be used to evaluate the reliability of modules, components, applications and the whole VI software. The security of a VI can be assessed by methods like vulnerability scanning and penetration analysis. In order to facilitate metrology institutions to perform metrological verification of VIs efficiently, an automatic metrological tool for the above validation is essential. Based on technologies of numerical simulation, software testing and system benchmarking, a framework for the automatic tool is proposed in this paper. Investigation on implementation of existing automatic tools that perform calculation of measurement uncertainty, software testing and security assessment demonstrates the feasibility of the automatic framework advanced.

  18. Improving OCD time to solution using Signal Response Metrology

    NASA Astrophysics Data System (ADS)

    Fang, Fang; Zhang, Xiaoxiao; Vaid, Alok; Pandev, Stilian; Sanko, Dimitry; Ramanathan, Vidya; Venkataraman, Kartik; Haupt, Ronny

    2016-03-01

    In recent technology nodes, advanced process and novel integration scheme have challenged the precision limits of conventional metrology; with critical dimensions (CD) of device reduce to sub-nanometer region. Optical metrology has proved its capability to precisely detect intricate details on the complex structures, however, conventional RCWA-based (rigorous coupled wave analysis) scatterometry has the limitations of long time-to-results and lack of flexibility to adapt to wide process variations. Signal Response Metrology (SRM) is a new metrology technique targeted to alleviate the consumption of engineering and computation resources by eliminating geometric/dispersion modeling and spectral simulation from the workflow. This is achieved by directly correlating the spectra acquired from a set of wafers with known process variations encoded. In SPIE 2015, we presented the results of SRM application in lithography metrology and control [1], accomplished the mission of setting up a new measurement recipe of focus/dose monitoring in hours. This work will demonstrate our recent field exploration of SRM implementation in 20nm technology and beyond, including focus metrology for scanner control; post etch geometric profile measurement, and actual device profile metrology.

  19. Velocity measurements and changes in position of Thwaites Glacier/iceberg tongue from aerial photography, Landsat images and NOAA AVHRR data

    USGS Publications Warehouse

    Ferrigno, Jane G.; Lucchitta, Baerbel K.; Mullinsallison, A. L.; Allen, Robert J.; Gould, W. G.

    1993-01-01

    The Thwaites Glacier/iceberg tongue complex has been a significant feature of the Antarctic coastline for at least 50 years. In 1986, major changes began to occur in this area. Fast ice melted and several icebergs calved from the base of the iceberg tongue and the terminus of Thwaites Glacier. The iceberg tongue rotated to an east-west orientation and drifted westward. Between 1986 and 1992, a total of 140 km of drift has occurred. Remote digital velocity measurements were made on Thwaites Glacier using sequential Landsat images to try to determine if changes in velocity had occurred in conjunction with the changes in ice position. Examination of the morphology of the glacier/iceberg tongue showed no evidence of surge activity.

  20. Metrology (including materials characterization) for nanoelectronics

    NASA Astrophysics Data System (ADS)

    Diebold, A. C.; Price, J.; Hung, P. Y.

    2006-03-01

    Integrated circuits have already entered the world of nanoelectronics. According to the International Technology Roadmap for Semiconductors, the industry will be extending CMOS technology through new materials and device structures for at least the next fifteen years. During that time, the gate length of nanotransistors will shrink to less than 10 nm. The electrical properties of nano-transistors will move into regime of short channel devices where new physics will result in changes in transistor operation. The number of transistors in a single IC is already approaching a number that results 2 billion functions per IC by 2010. Nano-sized features and high density will challenge metrology and characterization and most certainly move measurement further into the world of nanotechnology. Beyond CMOS, new nano-technology based devices are being considered as a means of continuing the rapid pace of technological innovation in electronics.

  1. Phasing metrology system for the GMT

    NASA Astrophysics Data System (ADS)

    Acton, D. Scott; Bouchez, Antonin

    2012-09-01

    The Giant Magellan Telescope (GMT) is a 25.4 m diameter ground-based segmented Gregorian telescope, composed of 7 8.4 meter diameter primary mirror segments, and 7 1 meter diameter adaptive secondary mirror segments. Co-phasing of the integrated optical system will be partially achieved by making real-time measurements of the wavefront of an offaxis guide star. However, slowly varying aberrations due to thermal and gravitational effects, as well as wind buffeting, will make it difficult to maintain alignment using real-time optical measurements alone. Consequently, we are proposing internal metrology systems to maintain the relative alignment of the optical elements. In this paper we describe a differential capacitive edge sensing system to maintain the relative alignment of the adaptive secondary mirror reference bodies. We also propose an interferometric system for sensing of the relative displacements of primary mirror segments.

  2. Metrology Needs for Metal Additive Manufacturing Powders

    NASA Astrophysics Data System (ADS)

    Slotwinski, John A.; Garboczi, Edward J.

    2015-03-01

    Additive manufacturing (AM) processes can produce highly complex and customized parts without the need for dedicated tooling and can produce parts directly from the part design information. These types of processes are poised to revolutionize the manufacturing industry, yet several challenges are currently preventing more widespread adoption of AM technologies. Among these challenges are metrology issues associated with the measurement and characterization of the metal powders used for AM systems. This article will describe the technical challenges and needs for characterizing metal AM powders, recent research efforts to address those needs, and current work to standardize characterization methods in ASTM and ISO, such as the recently released ASTM F3049, Standard Guide for Characterizing Properties of Metal Powders Used for Additive Manufacturing Processes.

  3. Improved Quantum Metrology Using Quantum Error Correction

    NASA Astrophysics Data System (ADS)

    Dür, W.; Skotiniotis, M.; Fröwis, F.; Kraus, B.

    2014-02-01

    We consider quantum metrology in noisy environments, where the effect of noise and decoherence limits the achievable gain in precision by quantum entanglement. We show that by using tools from quantum error correction this limitation can be overcome. This is demonstrated in two scenarios, including a many-body Hamiltonian with single-qubit dephasing or depolarizing noise and a single-body Hamiltonian with transversal noise. In both cases, we show that Heisenberg scaling, and hence a quadratic improvement over the classical case, can be retained. Moreover, for the case of frequency estimation we find that the inclusion of error correction allows, in certain instances, for a finite optimal interrogation time even in the asymptotic limit.

  4. A heterodyne interferometer for angle metrology

    SciTech Connect

    Hahn, Inseob; Weilert, M.; Wang, X.; Goullioud, R.

    2010-04-15

    We have developed a compact, high-resolution, angle measurement instrument based on a heterodyne interferometer. Common-path heterodyne interferometer metrology is used to measure displacements of a reflective target surface. In the interferometer set up, an optical mask is used to sample the laser beam reflecting back from four areas on a target surface. From the relative displacement measurements of the target surface areas, we can simultaneously determine angular rotations around two orthogonal axes in a plane perpendicular to the measurement beam propagation direction. The device is used in a testbed for a tracking telescope system where pitch and yaw angle measurements of a flat mirror are performed. Angle noise measurement of the device shows 0.1 nrad/{radical}(Hz) at 1 Hz, at a working distance of 1 m. The operation range and nonlinearity of the device when used with a flat mirror is approximately {+-}0.15 mrad, and 3 {mu}rad rms, respectively.

  5. SPC qualification strategy for CD metrology

    NASA Astrophysics Data System (ADS)

    Chain, Elizabeth E.; Ridens, Martin G.; Annand, James P.

    1996-09-01

    Effective statistical process control (SPC) necessitates the use of the proper control chart, used to monitor and control the important process characteristics. The control chart can be used to monitor stability for a process which is normally distributed. Scanning electron microscopy (SEM) critical dimension (CD) measurement, however, shows a systematic variation in repeated measurements of a sample in addition to the Gaussian variation, due to the nature of electron beam irradiation of materials. Because of this systematic variation the standard control charts do not work well for the control of this process. Addition of a slope-subtraction algorithm to the data collection system provides display of the slope-corrected data in addition to the raw data display, and permits the stability of the metrology tool to be demonstrated.

  6. Centimeter-scale high-resolution metrology of entire CVD-grown graphene sheets.

    PubMed

    Kyle, Jennifer Reiber; Guvenc, Ali; Wang, Wei; Ghazinejad, Maziar; Lin, Jian; Guo, Shirui; Ozkan, Cengiz S; Ozkan, Mihrimah

    2011-09-19

    A high-throughput metrology method for measuring the thickness and uniformity of entire large-area chemical vapor deposition-grown graphene sheets on arbitrary substrates is demonstrated. This method utilizes the quenching of fluorescence by graphene via resonant energy transfer to increase the visibility of graphene on a glass substrate. Fluorescence quenching is visualized by spin-coating a solution of polymer mixed with fluorescent dye onto the graphene then viewing the sample under a fluorescence microscope. A large-area fluorescence montage image of the dyed graphene sample is collected and processed to identify the graphene and indicate the graphene layer thickness throughout the entire graphene sample. Using this metrology method, the effect of different transfer techniques on the quality of the graphene sheet is studied. It is shown that small-area characterization is insufficient to truly evaluate the effect of the transfer technique on the graphene sample. The results indicate that introducing a drop of acetone or liquid poly(methyl methacrylate) (PMMA) on top of the transfer PMMA layer before soaking the graphene sample in acetone improves the quality of the graphene dramatically over immediately soaking the graphene in acetone. This work introduces a new method for graphene quantification that can quickly and easily identify graphene layers in a large area on arbitrary substrates. This metrology technique is well suited for many industrial applications due to its repeatability and flexibility. PMID:21815266

  7. Diffraction based overlay metrology: accuracy and performance on front end stack

    NASA Astrophysics Data System (ADS)

    Leray, Philippe; Cheng, Shaunee; Kandel, Daniel; Adel, Michael; Marchelli, Anat; Vakshtein, Irina; Vasconi, Mauro; Salski, Bartlomiej

    2008-03-01

    The overlay metrology budget is typically 1/10 of the overlay control budget resulting in overlay metrology total measurement uncertainty requirements of 0.57 nm for the most challenging use cases of the 32nm technology generation. Theoretical considerations show that overlay technology based on differential signal scatterometry (SCOL TM) has inherent advantages, which will allow it to achieve the 32nm technology generation requirements and go beyond it. In this work we present results of an experimental and theoretical study of SCOL. We present experimental results, comparing this technology with the standard imaging overlay metrology. In particular, we present performance results, such as precision and tool induced shift, for different target designs. The response to a large range of induced misalignment is also shown. SCOL performance on these targets for a real stack is reported. We also show results of simulations of the expected accuracy and performance associated with a variety of scatterometry overlay target designs. The simulations were carried out on several stacks including FEOL and BEOL materials. The inherent limitations and possible improvements of the SCOL technology are discussed. We show that with the appropriate target design and algorithms, scatterometry overlay achieves the accuracy required for future technology generations.

  8. IT Security Standards and Legal Metrology - Transfer and Validation

    NASA Astrophysics Data System (ADS)

    Thiel, F.; Hartmann, V.; Grottker, U.; Richter, D.

    2014-08-01

    Legal Metrology's requirements can be transferred into the IT security domain applying a generic set of standardized rules provided by the Common Criteria (ISO/IEC 15408). We will outline the transfer and cross validation of such an approach. As an example serves the integration of Legal Metrology's requirements into a recently developed Common Criteria based Protection Profile for a Smart Meter Gateway designed under the leadership of the Germany's Federal Office for Information Security. The requirements on utility meters laid down in the Measuring Instruments Directive (MID) are incorporated. A verification approach to check for meeting Legal Metrology's requirements by their interpretation through Common Criteria's generic requirements is also presented.

  9. Applications of surface metrology in firearm identification

    NASA Astrophysics Data System (ADS)

    Zheng, X.; Soons, J.; Vorburger, T. V.; Song, J.; Renegar, T.; Thompson, R.

    2014-01-01

    Surface metrology is commonly used to characterize functional engineering surfaces. The technologies developed offer opportunities to improve forensic toolmark identification. Toolmarks are created when a hard surface, the tool, comes into contact with a softer surface and causes plastic deformation. Toolmarks are commonly found on fired bullets and cartridge cases. Trained firearms examiners use these toolmarks to link an evidence bullet or cartridge case to a specific firearm, which can lead to a criminal conviction. Currently, identification is typically based on qualitative visual comparison by a trained examiner using a comparison microscope. In 2009, a report by the National Academies called this method into question. Amongst other issues, they questioned the objectivity of visual toolmark identification by firearms examiners. The National Academies recommended the development of objective toolmark identification criteria and confidence limits. The National Institute of Standards and Technology (NIST) have applied its experience in surface metrology to develop objective identification criteria, measurement methods, and reference artefacts for toolmark identification. NIST developed the Standard Reference Material SRM 2460 standard bullet and SRM 2461 standard cartridge case to facilitate quality control and traceability of identifications performed in crime laboratories. Objectivity is improved through measurement of surface topography and application of unambiguous surface similarity metrics, such as the maximum value (ACCFMAX) of the areal cross correlation function. Case studies were performed on consecutively manufactured tools, such as gun barrels and breech faces, to demonstrate that, even in this worst case scenario, all the tested tools imparted unique surface topographies that were identifiable. These studies provide scientific support for toolmark evidence admissibility in criminal court cases.

  10. Applicability Evaluation of Object Detection Method to Satellite and Aerial Imageries

    NASA Astrophysics Data System (ADS)

    Kamiya, K.; Fuse, T.; Takahashi, M.

    2016-06-01

    Since satellite and aerial imageries are recently widely spread and frequently observed, combination of them are expected to complement spatial and temporal resolution each other. One of the prospective applications is traffic monitoring, where objects of interest, or vehicles, need to be recognized automatically. Techniques that employ object detection before object recognition can save a computational time and cost, and thus take a significant role. However, there is not enough knowledge whether object detection method can perform well on satellite and aerial imageries. In addition, it also has to be studied how characteristics of satellite and aerial imageries affect the object detection performance. This study employ binarized normed gradients (BING) method that runs significantly fast and is robust to rotation and noise. For our experiments, 11-bits BGR-IR satellite imageries from WorldView-3, and BGR-color aerial imageries are used respectively, and we create thousands of ground truth samples. We conducted several experiments to compare the performances with different images, to verify whether combination of different resolution images improved the performance, and to analyze the applicability of mixing satellite and aerial imageries. The results showed that infrared band had little effect on the detection rate, that 11-bit images performed less than 8-bit images and that the better spatial resolution brought the better performance. Another result might imply that mixing higher and lower resolution images for training dataset could help detection performance. Furthermore, we found that aerial images improved the detection performance on satellite images.

  11. Precise 3D dimensional metrology using high-resolution x-ray computed tomography (μCT)

    NASA Astrophysics Data System (ADS)

    Brunke, Oliver; Santillan, Javier; Suppes, Alexander

    2010-09-01

    Over the past decade computed tomography (CT) with conventional x-ray sources has evolved from an imaging method in medicine to a well established technology for industrial applications in fields such as material science, light metals and plastics processing, microelectronics and geology. By using modern microfocus and nanofocus X-ray tubes, parts can be scanned with sub-micrometer resolutions. Currently, micro-CT is a technology increasingly used for metrology applications in the automotive industry. CT offers big advantages compared with conventional tactile or optical coordinate measuring machines (CMMs). This is of greater importance if complex parts with hidden or difficult accessible surfaces have to be measured. In these cases, CT offers the advantage of a high density of measurement points and a non-destructive and fast capturing of the sample's complete geometry. When using this growing technology the question arises how precise a μCT based CMM can measure as compared to conventional and established methods for coordinate measurements. For characterizing the metrological capabilities of a tactile or optical CMM, internationally standardized parameters like length measurement error and probing error are defined and used. To increase the acceptance of CT as a metrological method, our work seeks to clarify the definition and usage of parameters used in the field of metrology as these apply to CT. In this paper, an overview of the process chain in CT based metrology will be given and metrological characteristics will be described. For the potential user of CT as 3D metrology tool it is important to show the measurement accuracy and repeatability on realistic samples. Following a discussion of CT metrology techniques, two samples are discussed. The first compares a measured CT Data set to CAD data using CMM data as a standard for comparison of results. The second data second realistic data set will compare the results of applying both the CMM method of

  12. Moving Obstacle Avoidance for Unmanned Aerial Vehicles

    NASA Astrophysics Data System (ADS)

    Lin, Yucong

    There has been a vast increase in applications of Unmanned Aerial Vehicles (UAVs) in civilian domains. To operate in the civilian airspace, a UAV must be able to sense and avoid both static and moving obstacles for flight safety. While indoor and low-altitude environments are mainly occupied by static obstacles, risks in space of higher altitude primarily come from moving obstacles such as other aircraft or flying vehicles in the airspace. Therefore, the ability to avoid moving obstacles becomes a necessity for Unmanned Aerial Vehicles. Towards enabling a UAV to autonomously sense and avoid moving obstacles, this thesis makes the following contributions. Initially, an image-based reactive motion planner is developed for a quadrotor to avoid a fast approaching obstacle. Furthermore, A Dubin's curve based geometry method is developed as a global path planner for a fixed-wing UAV to avoid collisions with aircraft. The image-based method is unable to produce an optimal path and the geometry method uses a simplified UAV model. To compensate these two disadvantages, a series of algorithms built upon the Closed-Loop Rapid Exploratory Random Tree are developed as global path planners to generate collision avoidance paths in real time. The algorithms are validated in Software-In-the-Loop (SITL) and Hardware-In-the-Loop (HIL) simulations using a fixed-wing UAV model and in real flight experiments using quadrotors. It is observed that the algorithm enables a UAV to avoid moving obstacles approaching to it with different directions and speeds.

  13. Flexible vision-based navigation system for unmanned aerial vehicles

    NASA Astrophysics Data System (ADS)

    Blasch, Erik P.

    1995-01-01

    A critical component of unmanned aerial vehicles in the navigation system which provides position and velocity feedback for autonomous control. The Georgia Tech Aerial Robotics navigational system (NavSys) consists of four DVTStinger70C Integrated Vision Units (IVUs) with CCD-based panning platforms, software, and a fiducial onboard the vehicle. The IVUs independently scan for the retro-reflective bar-code fiducial while the NavSys image processing software performs a gradient threshold followed by a image search localization of three vertical bar-code lines. Using the (x,y) image coordinate and CCD angle, the NavSys triangulates the fiducial's (x,y) position, differentiates for velocity, and relays the information to the helicopter controller, which independently determines the z direction with an onboard altimeter. System flexibility is demonstrated by recognition of different fiducial shapes, night and day time operation, and is being extended to on-board and off-board navigation of aerial and ground vehicles. The navigation design provides a real-time, inexpensive, and effective system for determining the (x,y) position of the aerial vehicle with updates generated every 51 ms (19.6 Hz) at an accuracy of approximately +/- 2.8 in.

  14. Assessment of the present NASA optical metrology capabilities and recommendations for establishing an in-house NASA Optical Metrology Group

    NASA Technical Reports Server (NTRS)

    Parks, Robert E.

    1991-01-01

    An investigation into when it was first recognized that there was a deficiency in NASA optical metrology oversight capability, why this deficiency existed unnoticed for so long, and a proposal for correcting the problem is presented. It is explained why this optical metrology oversight is so critical to program success and at the same time, why it is difficult to establish due to the nature of the technology. The solution proposed is the establishment of an Optics Metrology Group within the NASA/MSFC Optics Branch with a line of authority from NASA S & MA.

  15. Examination of phase retrieval algorithms for patterned EUV mask metrology

    NASA Astrophysics Data System (ADS)

    Claus, Rene A.; Wang, Yow-Gwo; Wojdyla, Antoine; Benk, Markus P.; Goldberg, Kenneth A.; Neureuther, Andrew R.; Naulleau, Patrick P.

    2015-10-01

    We evaluate the performance of several phase retrieval algorithms using through-focus aerial image measurements of patterned EUV photomasks. Patterns present a challenge for phase retrieval algorithms due to the high- contrast and strong diffraction they produce. For this study, we look at the ability to correctly recover phase for line-space patterns on an EUV mask with a TaN absorber and for an etched EUV multilayer phase shift mask. The recovered phase and amplitude extracted from measurements taken using the SHARP EUV microscope at Lawrence Berkeley National Laboratory is compared to rigorous, 3D electromagnetic simulations. The impact of uncertainty in background intensity, coherence, and focus on the recovered field is evaluated to see if the algorithms respond differently.

  16. NPL scoops £25m for advanced metrology centre

    NASA Astrophysics Data System (ADS)

    Singh Chadha, Kulvinder

    2013-03-01

    The National Physical Laboratory (NPL) in Teddington, UK, is to receive £25m towards the construction of an Advanced Metrology Laboratory (AML) that will contain up to 20 labs and be complete by 2017.

  17. Technique for the metrology calibration of a Fourier transform spectrometer

    SciTech Connect

    Spencer, Locke D.; Naylor, David A

    2008-11-10

    A method is presented for using a Fourier transform spectrometer (FTS) to calibrate the metrology of a second FTS. This technique is particularly useful when the second FTS is inside a cryostat or otherwise inaccessible.

  18. Hybrid enabled thin film metrology using XPS and optical

    NASA Astrophysics Data System (ADS)

    Vaid, Alok; Iddawela, Givantha; Mahendrakar, Sridhar; Lenahan, Michael; Hossain, Mainul; Timoney, Padraig; Bello, Abner F.; Bozdog, Cornel; Pois, Heath; Lee, Wei Ti; Klare, Mark; Kwan, Michael; Kang, Byung Cheol; Isbester, Paul; Sendelbach, Matthew; Yellai, Naren; Dasari, Prasad; Larson, Tom

    2016-03-01

    Complexity of process steps integration and material systems for next-generation technology nodes is reaching unprecedented levels, the appetite for higher sampling rates is on the rise, while the process window continues to shrink. Current thickness metrology specifications reach as low as 0.1A for total error budget - breathing new life into an old paradigm with lower visibility for past few metrology nodes: accuracy. Furthermore, for advance nodes there is growing demand to measure film thickness and composition on devices/product instead of surrogate planar simpler pads. Here we extend our earlier work in Hybrid Metrology to the combination of X-Ray based reference technologies (high performance) with optical high volume manufacturing (HVM) workhorse metrology (high throughput). Our stated goal is: put more "eyes" on the wafer (higher sampling) and enable move to films on pattern structure (control what matters). Examples of 1X front-end applications are used to setup and validate the benefits.

  19. A Multichannel Averaging Phasemeter for Picometer Precision Laser Metrology

    NASA Technical Reports Server (NTRS)

    Halverson, Peter G.; Johnson, Donald R.; Kuhnert, Andreas; Shaklan, Stuart B.; Sero, Robert

    1999-01-01

    The Micro-Arcsecond Metrology (MAM) team at the Jet Propulsion Laboratory has developed a precision phasemeter for the Space Interferometry Mission (SIM). The current version of the phasemeter is well-suited for picometer accuracy distance measurements and tracks at speeds up to 50 cm/sec, when coupled to SIM's 1.3 micron wavelength heterodyne laser metrology gauges. Since the phasemeter is implemented with industry standard FPGA chips, other accuracy/speed trade-off points can be programmed for applications such as metrology for earth-based long-baseline astronomical interferometry (planet finding), and industrial applications such as translation stage and machine tool positioning. The phasemeter is a standard VME module, supports 6 metrology gauges, a 128 MHz clock, has programmable hardware averaging, and a maximum range of 232 cycles (2000 meters at 1.3 microns).

  20. In situ CTE measurements and damage detection using optical metrology

    NASA Astrophysics Data System (ADS)

    Rajaram, Satish; Cuadra, Jefferson; Saralaya, Raghav; Bartoli, Ivan; Kontsos, Antonios

    2016-02-01

    This paper presents a methodology to make coefficient of thermal expansion measurements through the combined use of two non-contact and full field optical metrology methods including digital image correlation and infrared thermography. In this context, active Infrared Thermography techniques combined with contact and non-contact deformation measurement methods have already been reported to measure materials’ thermal expansion. In addition, such techniques have been reported to be capable to detect surface and subsurface defects from changes in homogenous heat diffusion due to damage. Based on this knowledge, it is hypothesized in this article that the material response induced by thermal loading and quantified by coefficient of thermal expansion measurements could be further used as an indicator of damage. To validate the hypothesis three measurements were performed. The first established the effectiveness of using deformation and thermal full field data for coefficient of thermal expansion measurements. The second intended to demonstrate the advantage of using such full field data in order to provide site-specific measurements of thermal expansion. Finally damage was a priori induced to a metallic specimen, and the measured variations of local CTE confirmed the potential of using the described approach as a means of damage quantification in materials and structures.