Flexure-based nanomagnetic actuators

NASA Astrophysics Data System (ADS)

Vasquez, Daniel James

Nanometer-scale actuators powered through applied-magnetic fields have been designed, fabricated, and tested. These actuators consist of one or more ferromagnetic elements attached to a mechanical flexure. Two types of flexures were studied including a cantilever beam that is fixed on one end, and free on the other. The free end of the cantilever is attached to a, ferromagnetic element allowing a bending torque to be applied by a magnetic field. The second type of actuator design uses a set of torsion beams that are each anchored on one end, and attached to the magnetic element on the other end. The torsion beams are designed such that the application of a magnetic field will result in a twist along the long axis of the beam with little to no bending. The smallest fabricated and tested device is a cantilever-based ferromagnetic actuator that consists of a single 1.5-mum-long, 338-nm-wide, and 50-nm-thick nickel element, and a 2.2-mum-long, 110-nm-wide, and 30-nm-thick gold cantilever beam. A deflection of over 17° was measured for this actuator, while a similar one with a 10.1-mum long cantilever beam experienced measured deflections up to 57°. Torsion-based ferromagnetic actuators have been fabricated and tested with 110-nm-wide, and 50-rim-thick magnetic elements. Such magnetic elements contain only a single saturated magnetic domain. The ultimate scalability of ferromagnetic actuation is limited by the ability of thermal noise to affect the temporal stability of a nanometer-scale magnet. Theory to describe thermal noise and ultimate scalability of the ferromagnetic actuators has been developed. The size of the ferromagnetic actuators studied in this manuscript are smaller than most plant and animal cells. This enables the possibility of such actuators to manipulate a, living cell on an intracellular level. Other potential applications of such small actuators include MHz, to GHz frequency resonators, and tunable optical filters.

Membrane-based actuation for high-speed single molecule force spectroscopy studies using AFM.

PubMed

Sarangapani, Krishna; Torun, Hamdi; Finkler, Ofer; Zhu, Cheng; Degertekin, Levent

2010-07-01

Atomic force microscopy (AFM)-based dynamic force spectroscopy of single molecular interactions involves characterizing unbinding/unfolding force distributions over a range of pulling speeds. Owing to their size and stiffness, AFM cantilevers are adversely affected by hydrodynamic forces, especially at pulling speeds >10 microm/s, when the viscous drag becomes comparable to the unbinding/unfolding forces. To circumvent these adverse effects, we have fabricated polymer-based membranes capable of actuating commercial AFM cantilevers at speeds >or=100 microm/s with minimal viscous drag effects. We have used FLUENT, a computational fluid dynamics (CFD) software, to simulate high-speed pulling and fast actuation of AFM cantilevers and membranes in different experimental configurations. The simulation results support the experimental findings on a variety of commercial AFM cantilevers and predict significant reduction in drag forces when membrane actuators are used. Unbinding force experiments involving human antibodies using these membranes demonstrate that it is possible to achieve bond loading rates >or=10(6) pN/s, an order of magnitude greater than that reported with commercial AFM cantilevers and systems.

Actuation of atomic force microscopy microcantilevers using contact acoustic nonlinearities

DOE Office of Scientific and Technical Information (OSTI.GOV)

Torello, D.; Degertekin, F. Levent, E-mail: levent.degertekin@me.gatech.edu

2013-11-15

A new method of actuating atomic force microscopy (AFM) cantilevers is proposed in which a high frequency (>5 MHz) wave modulated by a lower frequency (∼300 kHz) wave passes through a contact acoustic nonlinearity at the contact interface between the actuator and the cantilever chip. The nonlinearity converts the high frequency, modulated signal to a low frequency drive signal suitable for actuation of tapping-mode AFM probes. The higher harmonic content of this signal is filtered out mechanically by the cantilever transfer function, providing for clean output. A custom probe holder was designed and constructed using rapid prototyping technologies and off-the-shelfmore » components and was interfaced with an Asylum Research MFP-3D AFM, which was then used to evaluate the performance characteristics with respect to standard hardware and linear actuation techniques. Using a carrier frequency of 14.19 MHz, it was observed that the cantilever output was cleaner with this actuation technique and added no significant noise to the system. This setup, without any optimization, was determined to have an actuation bandwidth on the order of 10 MHz, suitable for high speed imaging applications. Using this method, an image was taken that demonstrates the viability of the technique and is compared favorably to images taken with a standard AFM setup.« less

Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization

DOE Office of Scientific and Technical Information (OSTI.GOV)

Bijster, R. J. F., E-mail: roy.bijster@tno.nl; Vreugd, J. de; Sadeghian, H.

2014-08-18

In photo-thermal actuation, heat is added locally to a micro-cantilever by means of a laser. A fraction of the irradiation is absorbed, yielding thermal stresses and deformations in the structure. Harmonic modulation of the laser power causes the cantilever to oscillate. Moreover, a phase lag is introduced which is very sensitive to the spot location and the cantilever properties. This phase lag is theoretically predicted and experimentally verified. Combined with thermo-mechanical properties of the cantilever and its geometry, the location of the laser spot, the thermal diffusivity, and the layer thicknesses of the cantilever can be extracted.

On the coupling of nonlinear macro-fiber composite piezoelectric cantilever dynamics with hydrodynamic loads

NASA Astrophysics Data System (ADS)

Tan, D.; Erturk, A.

2018-03-01

For bio-inspired, fish-like robotic propulsion, the Macro-Fiber Composite (MFC) piezoelectric technology offers noiseless actuation with a balance between actuation force and velocity response. However, internal nonlinear- ities within the MFCs, such as piezoelectric softening, geometric hardening, inertial softening, and nonlinear dissipation, couple with the hydrodynamic loading on the structure from the surrounding fluid. In the present work, we explore nonlinear actuation of MFC cantilevers underwater and develop a mathematical framework for modeling and analysis. In vacuo resonant actuation experiments are conducted for a set of MFC cantilevers of varying length to width aspect ratios to validate the structural model in the absence of fluid loading. These MFC cantilevers are then subjected to underwater resonant actuation experiments, and model simulations are compared with nonlinear experimental frequency response functions. It is observed that semi-empirical hydro- dynamic loads obtained from quasilinear experiments have to be modified to account for amplitude dependent added mass, and additional nonlinear hydrodynamic effects might be present, yielding qualitative differences in the resulting underwater frequency respones curves with increased excitation amplitude.

A Flexure-Based Mechanism for Precision Adjustment of National Ignition Facility Target Shrouds in Three Rotational Degrees of Freedom

DOE PAGES

Boehm, K. -J.; Gibson, C. R.; Hollaway, J. R.; ...

2016-09-01

This study presents the design of a flexure-based mount allowing adjustment in three rotational degrees of freedom (DOFs) through high-precision set-screw actuators. The requirements of the application called for small but controlled angular adjustments for mounting a cantilevered beam. The proposed design is based on an array of parallel beams to provide sufficiently high stiffness in the translational directions while allowing angular adjustment through the actuators. A simplified physical model in combination with standard beam theory was applied to estimate the deflection profile and maximum stresses in the beams. A finite element model was built to calculate the stresses andmore » beam profiles for scenarios in which the flexure is simultaneously actuated in more than one DOF.« less

Ti Ni shape memory alloy film-actuated microstructures for a MEMS probe card

NASA Astrophysics Data System (ADS)

Namazu, Takahiro; Tashiro, Youichi; Inoue, Shozo

2007-01-01

This paper describes the development of a novel silicon (Si) cantilever beam device actuated by titanium-nickel (Ti-Ni) shape memory alloy (SMA) films. A Ti-Ni SMA film can yield high work output per unit volume, so a Ti-Ni film-actuated Si cantilever beam device is a prospective tool for use as a microelectromechanical system (MEMS) probe card that provides a relatively large contact force between the probe and electrode pad in spite of its minute size. Before fabrication of the device, the thermomechanical deformation behavior of Ti-Ni SMA films with various compositions was investigated in order to determine a sufficient constituent film for a MEMS actuator. As a result, Ti-Ni films having a Ti content of 50.2 to 52.6 atomic% (at%) were found to be usable for operation as a room temperature actuator. We have developed a Ti-Ni film-actuated Si cantilever beam device, which can produce a contact force by the cantilever bending when in contact, and also by the shape memory effect (SME) of the Ti-Ni film arising from Joule heating. The SME of the Ti-Ni film can generate an additional average contact force of 200 µN with application of 500 mW to the film. In addition to physical contact, a dependable electric contact between the Au film-coated probe tip and the Al film electrode was achieved. However, the contact resistance exhibited an average value of 25 Ω, which would have to be reduced for practical use. Reliability tests confirmed the durability of the Ti-Ni film-actuated Si cantilever-beam, in that the contact resistance was constant throughout a large number of physical contacts (>104 times).

Comparison between Conduction and Convection Effects on Self-Heating in Doped Microcantilevers

PubMed Central

Ansari, Mohd Zahid; Cho, Chongdu

2012-01-01

The present study investigates the effects of thermal conduction and convection on self-heating temperatures and bimetallic deflections produced in doped microcantilever sensors. These cantilevers are commonly used as sensors and actuators in microsystems. The cantilever is a monolith, multi-layer structure with a thin U-shaped element inside. The cantilever substrate is made of silicon and silicon dioxide, respectively, and the element is p-doped silicon. A numerical analysis package (ANSYS) is used to study the effect of cantilever substrate material, element width, applied voltage and the operating environments on cantilever characteristics. The numerical results for temperature are compared against their analytical models. Results indicate the numerical results are accurate within 6% of analytical, and Si/Si cantilevers are more suitable for biosensors and AFM, whereas, Si/SiO2 are for hotplates and actuators applications. PMID:22438736

Piezoelectric Actuator with Frequency Characteristics for a Middle-Ear Implant.

PubMed

Shin, Dong Ho; Cho, Jin-Ho

2018-05-24

The design and implementation of a novel piezoelectric-based actuator for an implantable middle-ear hearing aid is described in this paper. The proposed actuator has excellent low-frequency output characteristics, and can generate high output in a specific frequency band by adjusting the mechanical resonance. The actuator consists of a piezoelectric element, a miniature bellows, a cantilever membrane, a metal ring support, a ceramic tip, and titanium housing. The optimal structure of the cantilever-membrane design, which determines the frequency characteristics of the piezoelectric actuator, was derived through finite element analysis. Based on the results, the piezoelectric actuator was implemented, and its performance was verified through a cadaveric experiment. It was confirmed that the proposed actuator provides better performance than currently used actuators, in terms of frequency characteristics.

Thickness ratio effects on quasistatic actuation and sensing behavior of laminate magnetoelectric cantilevers

NASA Astrophysics Data System (ADS)

Wang, Yezuo; Atulasimha, Jayasimha; Clarke, Joshua; Sundaresan, Vishnu B.

2010-04-01

In this work, the magnetoelectric cantilever composed of a layer of Galfenol and a layer of PZT-5H is studied for novel applications such as surgical ablation tools and cutting tools for machining applications. For developing a suitable model for the magnetoelectric cantilever, an energy based approach for the non-linear constitutive behavior of the magnetostrictive material and linear piezoelectric constitutive equations will be coupled with Euler Bernoulli model for composite beams. The cantilever is held in a uniform magnetic field and the magnetic field is measured by a Gaussmeter. The tip-deflection of the cantilever is detected by a laser triangulation sensor. The piezoelectric response can be studied with low noise preamplifier. Four PZT-5H layers with different thickness are separately bonded on the top of the same Galfenol layer and characterized to study the thickness ratio effects on the quasistatic actuation and sensing behavior of the composite cantilever.

Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics

DOE Office of Scientific and Technical Information (OSTI.GOV)

Acheli, A., E-mail: aacheli@cdta.dz; Serhane, R.

This paper presents the studies of mechanical behavior of MEMS cantilever beam made of poly-silicon material, using the coupling of three application modes (plane strain, electrostatics and the moving mesh) of COMSOL Multi-physics software. The cantilevers playing a key role in Micro Electro-Mechanical Systems (MEMS) devices (switches, resonators, etc) working under potential shock. This is why they require actuation under predetermined conditions, such as electrostatic force or inertial force. In this paper, we present mechanical behavior of a cantilever actuated by an electrostatic force. In addition to the simplification of calculations, the weight of the cantilever was not taken intomore » account. Different parameters like beam displacement, electrostatics force and stress over the beam have been calculated by finite element method after having defining the geometry, the material of the cantilever model (fixed at one of ends but is free to move otherwise) and his operational space.« less

Note: A resonating reflector-based optical system for motion measurement in micro-cantilever arrays

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sathishkumar, P.; Punyabrahma, P.; Sri Muthu Mrinalini, R.

A robust, compact optical measurement unit for motion measurement in micro-cantilever arrays enables development of portable micro-cantilever sensors. This paper reports on an optical beam deflection-based system to measure the deflection of micro-cantilevers in an array that employs a single laser source, a single detector, and a resonating reflector to scan the measurement laser across the array. A strategy is also proposed to extract the deflection of individual cantilevers from the acquired data. The proposed system and measurement strategy are experimentally evaluated and demonstrated to measure motion of multiple cantilevers in an array.

Nanoporous-Gold-Based Hybrid Cantilevered Actuator Dealloyed and Driven by A Modified Rotary Triboelectric Nanogenerator

PubMed Central

Li, Xuequan; Liu, Mengmeng; Huang, Baisheng; Liu, Hong; Hu, Weiguo; Shao, Li-Hua; Wang, Zhong Lin

2016-01-01

We firstly designed an electrochemical system for dealloying to synthesize nanoporous gold (NPG) and also driving the novel NPG based actuator by utilizing a modified rotary triboelectric nanogenerator (TENG). Compared to the previous reported TENG whose outputs decline due to temperature rising resulting from electrodes friction, the modified TENG with a cooling system has stable output current and voltage increased by 14% and 20%, respectively. The novel cantilevered hybrid actuator characterised by light-weight (ca. 3 mg) and small volume (ca. 30 mm × 2 mm × 10 μm) is driven by a microcontroller modulated TENG with the displacement of 2.2 mm, which is about 106 times larger than that of traditional cantilever using planar surfaces. The energy conversion efficiencies defined as the energy consumed during dealloying and actuation compared with the output of TENG are 47% and 56.7%, respectively. PMID:27063987

Evaluation of sensitivity and selectivity of piezoresistive cantilever-array sensors

NASA Astrophysics Data System (ADS)

Yoshikawa, Genki; Lang, Hans-Peter; Staufer, Urs; Vettiger, Peter; Sakurai, Toshio; Gerber, Christoph

2008-03-01

Microfabricated cantilever-array sensors have attracted much attention in recent years due to their real-time detection of low concentration of molecules. Since the piezoresistive cantilever-array sensors do not require a bulky and expensive optical read-out system, they possess many advantages compared with optical read-out cantilever-array sensors. They can be miniaturized and integrated into a match-box sized device. In this study, we present the piezoresistive cantilever-array sensor system and evaluate its sensitivity and selectivity using various vapors of molecules, including alkane molecules with different chain length from 5 (n-pentane) to 12 (n-dodecane). Piezoresistive cantilevers were coated with different polymers (PVP, PAAM, PEI, and PVA) using an inkjet spotter. Each cantilever has a reference cantilever, constituting a Wheatstone-bridge. Each vapor was mixed with a constant nitrogen gas flow and introduced into the measurement chamber. According to the principle component analysis of data obtained, each molecule can be clearly distinguished from others. We also confirmed that this piezoresistive cantilever-array sensor system has sub-ppm sensitivity.

Asymmetric actuating structure generates negligible influence on the supporting base for high performance scanning probe microscopies

NASA Astrophysics Data System (ADS)

Yi Yan, Gang; Bin Liu, Yong; Hua Feng, Zhi

2014-02-01

An asymmetric actuating structure generating negligible influence on the supporting base for high performance scanning probe microscopies is proposed in this paper. The actuator structure consists of two piezostacks, one is used for actuating while the other is for counterbalancing. In contrast with balanced structure, the two piezostacks are installed at the same side of the supporting base. The effectiveness of the structure is proved by some experiments with the actuators fixed to the free end of a cantilever. Experimental results show that almost all of the vibration modes of the cantilever are suppressed effectively at a wide frequency range of 90 Hz-10 kHz.

Magnetoelectric versus thermal actuation characteristics of shear force AFM probes with piezoresistive detection

NASA Astrophysics Data System (ADS)

Sierakowski, Andrzej; Kopiec, Daniel; Majstrzyk, Wojciech; Kunicki, Piotr; Janus, Paweł; Dobrowolski, Rafał; Grabiec, Piotr; Rangelow, Ivo W.; Gotszalk, Teodor

2017-03-01

In this paper the authors compare methods used for piezoresistive microcantilevers actuation for the atomic force microscopy (AFM) imaging in the dynamic shear force mode. The piezoresistive detection is an attractive technique comparing the optical beam detection of deflection. The principal advantage is that no external alignment of optical source and detector are needed. When the microcantilever is deflected, the stress is transferred into a change of resistivity of piezoresistors. The integration of piezoresistive read-out provides a promising solution in realizing a compact non-contact AFM. Resolution of piezoresistive read-out is limited by three main noise sources: Johnson, 1/f and thermomechanical noise. In the dynamic shear force mode measurement the method used for cantilever actuation will also affect the recorded noise in the piezoresistive detection circuit. This is the result of a crosstalk between an aluminium path (current loop used for actuation) and piezoresistors located near the base of the beam. In this paper authors described an elaborated in ITE (Institute of Electron Technology) technology of fabrication cantilevers with piezoresistive detection of deflection and compared efficiency of two methods used for cantilever actuation.

Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy

PubMed Central

Zakerin, Marjan; Novak, Antonin; Toda, Masaya; Emery, Yves; Natalio, Filipe; Butt, Hans-Jürgen; Berger, Rüdiger

2017-01-01

In this paper, we apply a digital holographic microscope (DHM) in conjunction with stroboscopic acquisition synchronization. Here, the temperature-dependent decrease of the first resonance frequency (S1(T)) and Young’s elastic modulus (E1(T)) of silicon micromechanical cantilever sensors (MCSs) are measured. To perform these measurements, the MCSs are uniformly heated from T0 = 298 K to T = 450 K while being externally actuated with a piezo-actuator in a certain frequency range close to their first resonance frequencies. At each temperature, the DHM records the time-sequence of the 3D topographies for the given frequency range. Such holographic data allow for the extracting of the out-of-plane vibrations at any relevant area of the MCSs. Next, the Bode and Nyquist diagrams are used to determine the resonant frequencies with a precision of 0.1 Hz. Our results show that the decrease of resonance frequency is a direct consequence of the reduction of the silicon elastic modulus upon heating. The measured temperature dependence of the Young’s modulus is in very good accordance with the previously-reported values, validating the reliability and applicability of this method for micromechanical sensing applications. PMID:28545236

Use of magnetic micro-cantilevers to study the dynamics of 3D engineered smooth muscle constructs

NASA Astrophysics Data System (ADS)

Liu, Alan; Zhao, Ruogang; Copeland, Craig; Chen, Christopher; Reich, Daniel

2013-03-01

The normal and pathological response of arterial tissue to mechanical stimulus sheds important light on such conditions as atherosclerosis and hypertension. While most previous methods of determining the biomechanical properties of arteries have relied on excised tissue, we have devised a system that enables the growth and in situ application of forces to arrays of stable suspended microtissues consisting of arterial smooth muscle cells (SMCs). Briefly, this magnetic microtissue tester system consists of arrays of pairs of elastomeric magnetically actuated micro-cantilevers between which SMC-infused 3D collagen gels self-assemble and remodel into aligned microtissue constructs. These devices allow us to simultaneously apply force and track stress-strain relationships of multiple microtissues per substrate. We have studied the dilatory capacity and subsequent response of the tissues and find that the resulting stress-strain curves show viscoelastic behavior as well as a linear dynamic recovery. These results provide a foundation for elucidating the mechanical behavior of this novel model system as well as further experiments that simulate pathological conditions. Supported in part by NIH grant HL090747.

Stress compensation for arbitrary curvature control in vanadium dioxide phase transition actuators

DOE Office of Scientific and Technical Information (OSTI.GOV)

Dong, Kaichen, E-mail: dkc12@mails.tsinghua.edu.cn, E-mail: wuj@berkeley.edu; Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720; State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084

2016-07-11

Due to its thermally driven structural phase transition, vanadium dioxide (VO{sub 2}) has emerged as a promising material for micro/nano-actuators with superior volumetric work density, actuation amplitude, and repetition frequency. However, the high initial curvature of VO{sub 2} actuators severely obstructs the actuation performance and application. Here, we introduce a “seesaw” method of fabricating tri-layer cantilevers to compensate for the residual stress and realize nearly arbitrary curvature control of VO{sub 2} actuators. By simply adjusting the thicknesses of the individual layers, cantilevers with positive, zero, or negative curvatures can be engineered. The actuation amplitude can be decoupled from the curvaturemore » and controlled independently as well. Based on the experimentally measured residual stresses, we demonstrate sub-micron thick VO{sub 2} actuators with nearly zero final curvature and a high actuation amplitude simultaneously. This “seesaw” method can be further extended to the curvature engineering of other microelectromechanical system multi-layer structures where large stress-mismatch between layers are inevitable.« less

Fabrication of wrist-like SMA-based actuator by double smart soft composite casting

NASA Astrophysics Data System (ADS)

Rodrigue, Hugo; Wei, Wang; Bhandari, Binayak; Ahn, Sung-Hoon

2015-12-01

A new manufacturing method for smart soft composite (SSC) actuators that consists of double casting a SSC actuator to produce an actuator with non-linear shape memory alloy (SMA) wire positioning is proposed. This method is used to manufacture a tube-shaped SSC actuator in which the SMA wires follow the curvature of the tube and is capable of pure-twisting deformations while sustaining a cantilever load. The concept is tested by measuring the maximum twisting angle and a simple control method is proposed to control the twisting angle of the actuator. Then, a soft robotic wrist with a length of 18 cm is built, its load-carrying capability is tested by measuring the cantilever force required for deforming the actuator, and its load-carrying capability during actuation is tested by loading one end with different objects and actuating the actuator. This wrist actuator shows good repeatability, is capable of twisting deformations up to 25° while holding objects weighing 100 g, and can sustain loads above 2 N without undergoing buckling.

Four-plate piezoelectric actuator driving a large-diameter special optical fiber for nonlinear optical microendoscopy.

PubMed

Wang, Ying; Li, Zhi; Liang, Xiaobao; Fu, Ling

2016-08-22

In nonlinear optical microendoscope (NOME), a fiber with excellent optical characteristics and a miniature scanning mechanism at the distal end are two key components. Double-clad fibers (DCFs) and double-clad photonic crystal fibers (DCPCFs) have shown great optical characteristics but limited vibration amplitude due to large diameter. Besides reducing the damping of fiber cantilever, optimizing the structural of the actuator for lower energy dissipation also contributes to better driving capability. This paper presented an optimized actuator for driving a particular fiber cantilever in the view point of energy. Firstly, deformation energy of a bending fiber cantilever operating in resonant mode is investigated. Secondly, strain and stress analyses revealed that the four-plate actuator achieved lower energy dissipation. Then, finite-element simulations showed that the large-diameter fiber yielded an adequate vibration amplitude driven by a four-plate actuator, which was confirmed by experiments of our home-made four-plate actuator prototypes. Additionally, a NOME based on a DCPCF with a diameter of 350 μm driven by four-plate piezoelectric actuator has been developed. The NOME can excite and collect intrinsic second-harmonic and two-photon fluorescence signals with the excitation power of 10-30 mW and an adequate field of view of 200 μm, which suggest great potential applications in neuroscience and clinical diagnoses.

Static/dynamic trade-off performance of PZT thick film micro-actuators

NASA Astrophysics Data System (ADS)

Bienaimé, Alex; Chalvet, Vincent; Clévy, Cédric; Gauthier-Manuel, Ludovic; Baron, Thomas; Rakotondrabe, Micky

2015-07-01

Piezoelectric actuators are widespread in the design of micro/nanorobotic tools and microsystems. Studies toward the integration of such actuators in complex micromechatronic systems require the size reduction of these actuators while retaining a wide range of performance. Two main fabrication processes are currently used for the fabrication of piezoelectric actuators, providing very different behaviors: (i) the use of a bulk lead zirconate titanate (PZT) layer and (ii) the use of thin film growth. In this paper, we propose a trade-off between these two extreme processes and technologies in order to explore the performance of new actuators. This resulted in the design and fabrication of thick film PZT unimorph cantilevers. They allowed a high level of performance, both in the static (displacement) and dynamic (first resonance frequency) regimes, in addition to being small in size. Such cantilever sizes are obtained through the wafer scale bonding and thinning of a PZT plate onto a silicon on insulator wafer. The piezoelectric cantilevers have a 26 μm thick PZT layer with a 5 μm thick silicon layer, over a length of 4 mm and a width of 150 μm. Experimental characterization has shown that the static displacements obtained are in excess of 4.8 μm V-1 and the resonance frequencies are up to 1103 Hz, which are useful for large displacements and low voltage actuators.

Design and experimental evaluation of flextensional-cantilever based piezoelectric transducers for flow energy harvesting

NASA Astrophysics Data System (ADS)

Lee, Hyeong Jae; Sherrit, Stewart; Tosi, Luis Phillipe; Colonius, Tim

2016-04-01

Cantilever type piezoelectric harvesters, such as bimorphs, are typically used for vibration induced energy harvesting. However, a major drawback of a piezoelectric bimorph is its brittle nature in harsh environments, precipitating short life-times as well as output power degradation. The emphasis in this work is to design robust, highly efficient piezoelectric harvesters that are capable of generating electrical power in the milliwatt range. Various harvesters were modeled, designed and prototyped, and the flextensional actuator based harvester, where the metal cantilever is mounted and coupled between two flextensional actuators, was found to be a viable alternative to the cantilever type piezoelectric harvesters. Preliminary tests show that these devices equipped with 5x5x36 mm two piezoelectric PZT stacks can produce greater than 50 mW of power under air flow induced vibrations.

Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor

PubMed Central

Guan, Liu; Zhao, Jiahao; Yu, Shijie; Li, Peng; You, Zheng

2010-01-01

Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficient α related to the two frequency shifts is confirmed. PMID:22163588

Dynamic actuation of single-crystal diamond nanobeams

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sohn, Young-Ik; Burek, Michael J.; Lončar, Marko, E-mail: loncar@seas.harvard.edu

2015-12-14

We show the dielectrophoretic actuation of single-crystal diamond nanomechanical devices. Gradient radio-frequency electromagnetic forces are used to achieve actuation of both cantilever and doubly clamped beam structures, with operation frequencies ranging from a few MHz to ∼50 MHz. Frequency tuning and parametric actuation are also studied.

Vibration energy harvester with sustainable power based on a single-crystal piezoelectric cantilever array.

PubMed

Kim, Moonkeun; Lee, Sang-Kyun; Ham, Yong-Hyun; Yang, Yil Suk; Kwon, Jong-Kee; Kwon, Kwang-Ho

2012-08-01

We designed and fabricated a bimorph cantilever array for sustainable power with an integrated Cu proof mass to obtain additional power and current. We fabricated a cantilever system using single-crystal piezoelectric material and compared the calculations for single and arrayed cantilevers to those obtained experimentally. The vibration energy harvester had resonant frequencies of 60.4 and 63.2 Hz for short and open circuits, respectively. The damping ratio and quality factor of the cantilever device were 0.012 and 41.66, respectively. The resonant frequency at maximum average power was 60.8 Hz. The current and highest average power of the harvester array were found to be 0.728 mA and 1.61 mW, respectively. The sustainable maximum power was obtained after slightly shifting the short-circuit frequency. In order to improve the current and power using an array of cantilevers, we also performed energy conversion experiments.

Actuation and transduction of resonant vibrations in GaAs/AlGaAs-based nanoelectromechanical systems containing two-dimensional electron gas

DOE Office of Scientific and Technical Information (OSTI.GOV)

Shevyrin, A. A., E-mail: shevandrey@isp.nsc.ru; Pogosov, A. G.; Bakarov, A. K.

2015-05-04

Driven vibrations of a nanoelectromechanical system based on GaAs/AlGaAs heterostructure containing two-dimensional electron gas are experimentally investigated. The system represents a conductive cantilever with the free end surrounded by a side gate. We show that out-of-plane flexural vibrations of the cantilever are driven when alternating signal biased by a dc voltage is applied to the in-plane side gate. We demonstrate that these vibrations can be on-chip linearly transduced into a low-frequency electrical signal using the heterodyne down-mixing method. The obtained data indicate that the dominant physical mechanism of the vibrations actuation is capacitive interaction between the cantilever and the gate.

Characterization of Intercalated Graphite Fibers for Microelectromechanical Systems (MEMS) Applications

DTIC Science & Technology

2007-03-01

electric charge to drive movement, eg. a micromirror . These two actuator types have different characteristics and apply dif- ferent forces. The thermal...actuators include micromirrors , comb drives, cantilevers and scratch drives. A scratch drive actuator uses an applied square wave voltage to operate, as

Physics-based signal processing algorithms for micromachined cantilever arrays

DOEpatents

Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

2013-11-19

A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

A Lorentz force actuated magnetic field sensor with capacitive read-out

NASA Astrophysics Data System (ADS)

Stifter, M.; Steiner, H.; Kainz, A.; Keplinger, F.; Hortschitz, W.; Sauter, T.

2013-05-01

We present a novel design of a resonant magnetic field sensor with capacitive read-out permitting wafer level production. The device consists of a single-crystal silicon cantilever manufactured from the device layer of an SOI wafer. Cantilevers represent a very simple structure with respect to manufacturing and function. On the top of the structure, a gold lead carries AC currents that generate alternating Lorentz forces in an external magnetic field. The free end oscillation of the actuated cantilever depends on the eigenfrequencies of the structure. Particularly, the specific design of a U-shaped structure provides a larger force-to-stiffness-ratio than standard cantilevers. The electrodes for detecting cantilever deflections are separately fabricated on a Pyrex glass-wafer. They form the counterpart to the lead on the freely vibrating planar structure. Both wafers are mounted on top of each other. A custom SU-8 bonding process on wafer level creates a gap which defines the equilibrium distance between sensing electrodes and the vibrating structure. Additionally to the capacitive read-out, the cantilever oscillation was simultaneously measured with laser Doppler vibrometry through proper windows in the SOI handle wafer. Advantages and disadvantages of the asynchronous capacitive measurement configuration are discussed quantitatively and presented by a comprehensive experimental characterization of the device under test.

Piezoelectric cantilever sensors

NASA Technical Reports Server (NTRS)

Shih, Wan Y. (Inventor); Shih, Wei-Heng (Inventor); Shen, Zuyan (Inventor)

2008-01-01

A piezoelectric cantilever with a non-piezoelectric, or piezoelectric tip useful as mass and viscosity sensors. The change in the cantilever mass can be accurately quantified by monitoring a resonance frequency shift of the cantilever. For bio-detection, antibodies or other specific receptors of target antigens may be immobilized on the cantilever surface, preferably on the non-piezoelectric tip. For chemical detection, high surface-area selective absorbent materials are coated on the cantilever tip. Binding of the target antigens or analytes to the cantilever surface increases the cantilever mass. Detection of target antigens or analytes is achieved by monitoring the cantilever's resonance frequency and determining the resonance frequency shift that is due to the mass of the adsorbed target antigens on the cantilever surface. The use of a piezoelectric unimorph cantilever allows both electrical actuation and electrical sensing. Incorporating a non-piezoelectric tip (14) enhances the sensitivity of the sensor. In addition, the piezoelectric cantilever can withstand damping in highly viscous liquids and can be used as a viscosity sensor in wide viscosity range.

Cantilevered probe detector with piezoelectric element

DOEpatents

Adams, Jesse D; Sulchek, Todd A; Feigin, Stuart C

2014-04-29

A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

Cantilevered probe detector with piezoelectric element

DOEpatents

Adams, Jesse D; Sulchek, Todd A; Feigin, Stuart C

2013-04-30

A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

Cantilevered probe detector with piezoelectric element

DOEpatents

Adams, Jesse D [Reno, NV; Sulchek, Todd A [Oakland, CA; Feigin, Stuart C [Reno, NV

2012-07-10

A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

Cantilevered probe detector with piezoelectric element

DOEpatents

Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C.

2010-04-06

A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

High-efficiency integrated piezoelectric energy harvesting systems

NASA Astrophysics Data System (ADS)

Hande, Abhiman; Shah, Pradeep

2010-04-01

This paper describes hierarchically architectured development of an energy harvesting (EH) system that consists of micro and/or macro-scale harvesters matched to multiple components of remote wireless sensor and communication nodes. The micro-scale harvesters consist of thin-film MEMS piezoelectric cantilever arrays and power generation modules in IC-like form to allow efficient EH from vibrations. The design uses new high conversion efficiency thin-film processes combined with novel cantilever structures tuned to multiple resonant frequencies as broadband arrays. The macro-scale harvesters are used to power the collector nodes that have higher power specifications. These bulk harvesters can be integrated with efficient adaptive power management circuits that match transducer impedance and maximize power harvested from multiple scavenging sources with very low intrinsic power consumption. Texas MicroPower, Inc. is developing process based on a composition that has the highest reported energy density as compared to other commercially available bulk PZT-based sensor/actuator ceramic materials and extending it to thin-film materials and miniature conversion transducer structures. The multiform factor harvesters can be deployed for several military and commercial applications such as underground unattended sensors, sensors in oil rigs, structural health monitoring, supply chain management, and battlefield applications such as sensors on soldier apparel, equipment, and wearable electronics.

Finite Element Modelling and Analysis of Damage Detection Methodology in Piezo Electric Sensor and Actuator Integrated Sandwich Cantilever Beam

NASA Astrophysics Data System (ADS)

Pradeep, K. R.; Thomas, A. M.; Basker, V. T.

2018-03-01

Structural health monitoring (SHM) is an essential component of futuristic civil, mechanical and aerospace structures. It detects the damages in system or give warning about the degradation of structure by evaluating performance parameters. This is achieved by the integration of sensors and actuators into the structure. Study of damage detection process in piezoelectric sensor and actuator integrated sandwich cantilever beam is carried out in this paper. Possible skin-core debond at the root of the cantilever beam is simulated and compared with undamaged case. The beam is actuated using piezoelectric actuators and performance differences are evaluated using Polyvinylidene fluoride (PVDF) sensors. The methodology utilized is the voltage/strain response of the damaged versus undamaged beam against transient actuation. Finite element model of piezo-beam is simulated in ANSYSTM using 8 noded coupled field element, with nodal degrees of freedoms are translations in the x, y directions and voltage. An aluminium sandwich beam with a length of 800mm, thickness of core 22.86mm and thickness of skin 0.3mm is considered. Skin-core debond is simulated in the model as unmerged nodes. Reduction in the fundamental frequency of the damaged beam is found to be negligible. But the voltage response of the PVDF sensor under transient excitation shows significantly visible change indicating the debond. Piezo electric based damage detection system is an effective tool for the damage detection of aerospace and civil structural system having inaccessible/critical locations and enables online monitoring possibilities as the power requirement is minimal.

Resonant micro and nanoelectromechanical systems: Actuation and biological sensing studies

NASA Astrophysics Data System (ADS)

Ilic, Bojan

This thesis explores various actuation mechanisms of resonant nanoelectro-mechanical systems (NEMS) with emphasis directed towards detection of biomolecules. Arrays of bulk and surface micromachined devices, made using conventional thin film fabrication methods, are used to explore the mass loading effects of selective molecular immobilization on the surface of the NEMS resonators. Experimentally measured shift in the first eigenfrequency is correlated to the amount of mass loading from the binding events and verified using theoretical constructs. Under ambient conditions where considerable damping occurs, immunospecific detection of single Escherichia coli O157:H7 cells is demonstrated by measuring the out of plane vibrational resonant mode using an optical deflection system with thermal noise as an excitation mechanism. Further sensitivity enhancement utilizing vacuum encapsulation in conjunction with piezoelectric actuation and tailoring of the cantilever dimensions is demonstrated by measuring mass loading of a nonpathogenic insect baculovirus, single Aminopropyltriethoxysilane (APTS), Hexamethyldisilazane (HMDS) and Octade-cyltrichlorosilane (OTS) monolayers. To highlight the lower detectable mass limit, surface machined NEMS oscillators with integrated circular Au contacts and sub-attogram mass detection sensitivity are used for selective immobilization of dinitrophenyl poly(ethylene glycol) undecanthiol based molecules. Experimental and theoretical elucidation of optical actuation of NEMS cantilevers at large distances from the clamped end is presented. These observations are considered within the theoretical framework of heat transfer and used to measure binding events of single double-stranded deoxyribonucleic acid (dsDNA) molecules to localized gold nanodots near the free end of a NEMS oscillator. Because this method allows direct coupling of energy into the device layer, several modes of in-plane vibrations are observed and employed in shaking off spherical latex particles. Finally, this thesis describes studies of dynamic detection of vibrational characteristics of suspended NEMS oscillators through direct coupling with a micromechanical probe. Changes in the dynamic amplitude and phase of the probe allow the measurement of the mechanical quality factor. Measured spectral response of the NEMS is in good agreement with optical characterization and modelling results.

A closed-loop system for frequency tracking of piezoresistive cantilever sensors

NASA Astrophysics Data System (ADS)

Wasisto, Hutomo Suryo; Zhang, Qing; Merzsch, Stephan; Waag, Andreas; Peiner, Erwin

2013-05-01

A closed loop circuit capable of tracking resonant frequencies for MEMS-based piezoresistive cantilever resonators is developed in this work. The proposed closed-loop system is mainly based on a phase locked loop (PLL) circuit. In order to lock onto the resonant frequency of the resonator, an actuation signal generated from a voltage-controlled oscillator (VCO) is locked to the phase of the input reference signal of the cantilever sensor. In addition to the PLL component, an instrumentation amplifier and an active low pass filter (LPF) are connected to the system for gaining the amplitude and reducing the noise of the cantilever output signals. The LPF can transform a rectangular signal into a sinusoidal signal with voltage amplitudes ranging from 5 to 10 V which are sufficient for a piezoactuator input (i.e., maintaining a large output signal of the cantilever sensor). To demonstrate the functionality of the system, a self-sensing silicon cantilever resonator with a built-in piezoresistive Wheatstone bridge is fabricated and integrated with the circuit. A piezoactuator is utilized for actuating the cantilever into resonance. Implementation of this closed loop system is used to track the resonant frequency of a silicon cantilever-based sensor resonating at 9.4 kHz under a cross-sensitivity test of ambient temperature. The changes of the resonant frequency are interpreted using a frequency counter connected to the system. From the experimental results, the temperature sensitivity and coefficient of the employed sensor are 0.3 Hz/°C and 32.8 ppm/°C, respectively. The frequency stability of the system can reach up to 0.08 Hz. The development of this system will enable real-time nanoparticle monitoring systems and provide a miniaturization of the instrumentation modules for cantilever-based nanoparticle detectors.

Backed Bending Actuator

NASA Technical Reports Server (NTRS)

Costen, Robert C.; Su, Ji

2004-01-01

Bending actuators of a proposed type would partly resemble ordinary bending actuators, but would include simple additional components that would render them capable of exerting large forces at small displacements. Like an ordinary bending actuator, an actuator according to the proposal would include a thin rectangular strip that would comprise two bonded layers (possibly made of electroactive polymers with surface electrodes) and would be clamped at one end in the manner of a cantilever beam. Unlike an ordinary bending actuator, the proposed device would include a rigid flat backplate that would support part of the bending strip against backward displacement; because of this feature, the proposed device is called a backed bending actuator. When an ordinary bending actuator is inactive, the strip typically lies flat, the tip displacement is zero, and the force exerted by the tip is zero. During activation, the tip exerts a transverse force and undergoes a bending displacement that results from the expansion or contraction of one or more of the bonded layers. The tip force of an ordinary bending actuator is inversely proportional to its length; hence, a long actuator tends to be weak. The figure depicts an ordinary bending actuator and the corresponding backed bending actuator. The bending, the tip displacement (d(sub t)), and the tip force (F) exerted by the ordinary bending actuator are well approximated by the conventional equations for the loading and deflection of a cantilever beam subject to a bending moment which, in this case, is applied by the differential expansion or contraction of the bonded layers. The bending, displacement, and tip force of the backed bending actuator are calculated similarly, except that it is necessary to account for the fact that the force F(sub b) that resists the displacement of the tip could be sufficient to push part of the strip against the backplate; in such a condition, the cantilever beam would be effectively shortened (length L*) and thereby stiffened and, hence, made capable of exerting a greater tip force for a given degree of differential expansion or contraction of the bonded layers. Taking all of these effects into account, the cantilever-beam equations show that F(sub b) would be approximately inversely proportional to d(sup 1/2) for d less than a calculable amount, denoted the transition displacement (dt). For d less than d(sub t), part of the strip would be pressed against the backplate. Therefore, the force F(sub b) would be very large for d at or near zero and would decrease as d increases toward d(sub t). At d greater than d(sub t), none of the strip would be pressed against the backplate and F(sub b) would equal the tip force F of the corresponding ordinary bending actuator. The advantage of the proposal is that a backed bending actuator could be made long to obtain large displacement when it encountered little resistance but it could also exert a large zero-displacement force, so that it could more easily start the movement of a large mass, throw a mechanical switch, or release a stuck mechanism.

Light-Driven Polymeric Bimorph Actuators

NASA Technical Reports Server (NTRS)

Adamovsky, Gregory; Sarkisov, Sergey S.; Curley, Michael J.

2009-01-01

Light-driven polymeric bimorph actuators are being developed as alternatives to prior electrically and optically driven actuators in advanced, highly miniaturized devices and systems exemplified by microelectromechanical systems (MEMS), micro-electro-optical-mechanical systems (MEOMS), and sensor and actuator arrays in smart structures. These light-driven polymeric bimorph actuators are intended to satisfy a need for actuators that (1) in comparison with the prior actuators, are simpler and less power-hungry; (2) can be driven by low-power visible or mid-infrared light delivered through conventional optic fibers; and (3) are suitable for integration with optical sensors and multiple actuators of the same or different type. The immediate predecessors of the present light-driven polymeric bimorph actuators are bimorph actuators that exploit a photorestrictive effect in lead lanthanum zirconate titanate (PLZT) ceramics. The disadvantages of the PLZT-based actuators are that (1) it is difficult to shape the PLZT ceramics, which are hard and brittle; (2) for actuation, it is necessary to use ultraviolet light (wavelengths < 380 nm), which must be generated by use of high-power, high-pressure arc lamps or lasers; (3) it is difficult to deliver sufficient ultraviolet light through conventional optical fibers because of significant losses in the fibers; (4) the response times of the PLZT actuators are of the order of several seconds unacceptably long for typical applications; and (5) the maximum mechanical displacements of the PLZT-based actuators are limited to those characterized by low strains beyond which PLZT ceramics disintegrate because of their brittleness. The basic element of a light-driven bimorph actuator of the present developmental type is a cantilever beam comprising two layers, at least one of which is a polymer that exhibits a photomechanical effect (see figure). The dominant mechanism of the photomechanical effect is a photothermal one: absorption of light energy causes heating, which, in turn, causes thermal expansion.

Use of thermal cycling to reduce adhesion of OTS coated coated MEMS cantilevers

NASA Astrophysics Data System (ADS)

Ali, Shaikh M.; Phinney, Leslie M.

2003-01-01

°Microelectromechanical systems (MEMS) have enormous potential to contribute in diverse fields such as automotive, health care, aerospace, consumer products, and biotechnology, but successful commercial applications of MEMS are still small in number. Reliability of MEMS is a major impediment to the commercialization of laboratory prototypes. Due to the multitude of MEMS applications and the numerous processing and packaging steps, MEMS are exposed to a variety of environmental conditions, making the prediction of operational reliability difficult. In this paper, we investigate the effects of operating temperature on the in-use adhesive failure of electrostatically actuated MEMS microcantilevers coated with octadecyltrichlorosilane (OTS) films. The cantilevers are subjected to repeated temperature cycles and electrostatically actuated at temperatures between 25°C and 300°C in ambient air. The experimental results indicate that temperature cycling of the OTS coated cantilevers in air reduces the sticking probability of the microcantilevers. The sticking probability of OTS coated cantilevers was highest during heating, which decreased during cooling, and was lowest during reheating. Modifications to the OTS release method to increase its yield are also discussed.

Hybrid macro-micro fluidics system for a chip-based biosensor

NASA Astrophysics Data System (ADS)

Tamanaha, C. R.; Whitman, L. J.; Colton, R. J.

2002-03-01

We describe the engineering of a hybrid fluidics platform for a chip-based biosensor system that combines high-performance microfluidics components with powerful, yet compact, millimeter-scale pump and valve actuators. The microfluidics system includes channels, valveless diffuser-based pumps, and pinch-valves that are cast into a poly(dimethylsiloxane) (PDMS) membrane and packaged along with the sensor chip into a palm-sized plastic cartridge. The microfluidics are driven by pump and valve actuators contained in an external unit (with a volume ~30 cm3) that interfaces kinematically with the PDMS microelements on the cartridge. The pump actuator is a simple-lever, flexure-hinge displacement amplifier that increases the motion of a piezoelectric stack. The valve actuators are an array of cantilevers operated by shape memory alloy wires. All components can be fabricated without the need for complex lithography or micromachining, and can be used with fluids containing micron-sized particulates. Prototypes have been modeled and tested to ensure the delivery of microliter volumes of fluid and the even dispersion of reagents over the chip sensing elements. With this hybrid approach to the fluidics system, the biochemical assay benefits from the many advantages of microfluidics yet we avoid the complexity and unknown reliability of immature microactuator technologies.

An Artificial Nose Based on Microcantilever Array Sensors

NASA Astrophysics Data System (ADS)

Lang, H. P.; Ramseyer, J. P.; Grange, W.; Braun, T.; Schmid, D.; Hunziker, P.; Jung, C.; Hegner, M.; Gerber, C.

2007-03-01

We used microfabricated cantilever array sensors for an artificial nose setup. Each cantilever is coated on its top surface with a polymer layer. Volatile gaseous analytes are detected by tracking the diffusion process of the molecules into the polymer layers, resulting in swelling of the polymer layers and therewith bending of the cantilevers. From the bending pattern of all cantilevers in the array, a characteristic 'fingerprint' of the analyte is obtained, which is evaluated using principal component analysis. In a flow of dry nitrogen gas, the bending of the cantilevers is reverted to its initial state before exposure to the analyte, which allows reversible and reproducible operation of the sensor. We show examples of detection of solvents, perfume essences and beverage flavors. In a medical application, the setup provides indication of presence of diseases in patient's breath samples.

An electrically actuated molecular toggle switch

NASA Astrophysics Data System (ADS)

Gerhard, Lukas; Edelmann, Kevin; Homberg, Jan; Valášek, Michal; Bahoosh, Safa G.; Lukas, Maya; Pauly, Fabian; Mayor, Marcel; Wulfhekel, Wulf

2017-03-01

Molecular electronics is considered a promising approach for future nanoelectronic devices. In order that molecular junctions can be used as electrical switches or even memory devices, they need to be actuated between two distinct conductance states in a controlled and reproducible manner by external stimuli. Here we present a tripodal platform with a cantilever arm and a nitrile group at its end that is lifted from the surface. The formation of a coordinative bond between the nitrile nitrogen and the gold tip of a scanning tunnelling microscope can be controlled by both electrical and mechanical means, and leads to a hysteretic switching of the conductance of the junction by more than two orders of magnitude. This toggle switch can be actuated with high reproducibility so that the forces involved in the mechanical deformation of the molecular cantilever can be determined precisely with scanning tunnelling microscopy.

Piezoresistive cantilever array sensor for consolidated bioprocess monitoring

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kim, Seonghwan Sam; Rahman, Touhidur; Senesac, Larry R

2009-01-01

Cellulolytic microbes occur in diverse natural niches and are being screened for industrial modification and utility. A microbe for Consolidated bioprocessing (CBP) development can rapidly degrade pure cellulose and then ferment the resulting sugars into fuels. To identify and screen for novel microbes for CBP, we have developed a piezoresistive cantilever array sensor which is capable of simultaneous monitoring of glucose and ethanol concentration changes in a phosphate buffer solution. 4-mercaptophenylboronic acid (4-MPBA) and polyethyleneglycol (PEG)-thiol are employed to functionalize each piezoresistive cantilever for glucose and ethanol sensing, respectively. Successful concentration measurements of glucose and ethanol with minimal interferences aremore » obtained with our cantilever array sensor.« less

Dynamic characterization of small fibers based on the flexural vibrations of a piezoelectric cantilever probe

NASA Astrophysics Data System (ADS)

Zhang, Xiaofei; Ye, Xuan; Li, Xide

2016-08-01

In this paper, we present a cantilever-probe system excited by a piezoelectric actuator, and use it to measure the dynamic mechanical properties of a micro- and nanoscale fiber. Coupling the fiber to the free end of the cantilever probe, we found the dynamic stiffness and damping coefficient of the fiber from the resonance frequency and the quality factor of the fiber-cantilever-probe system. The properties of Bacillus subtilis fibers measured using our proposed system agreed with tensile measurements, validating our method. Our measurements show that the piezoelectric actuator coupled to cantilever probe can be made equivalent to a clamped cantilever with an effective length, and calculated results show that the errors of measured natural frequency of the system can be ignored if the coupled fiber has an inclination angle of alignment of less than 10°. A sensitivity analysis indicates that the first or second resonant mode is the sensitive mode to test the sample’s dynamic stiffness, while the damping property has different sensitivities for the first four modes. Our theoretical analysis demonstrates that the double-cantilever probe is also an effective sensitive structure that can be used to perform dynamic loading and characterize dynamic response. Our method has the advantage of using amplitude-frequency curves to obtain the dynamic mechanical properties without directly measuring displacements and forces as in tensile tests, and it also avoids the effects of the complex surface structure and deformation presenting in contact resonance method. Our method is effective for measuring the dynamic mechanical properties of fiber-like one-dimensional (1D) materials.

Board of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada, Reno

DOEpatents

Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C.

2017-07-11

A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

Asymmetric resonance response analysis of a thermally excited silicon microcantilever for mass-sensitive nanoparticle detection

NASA Astrophysics Data System (ADS)

Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Wasisto, Hutomo Suryo; Peiner, Erwin

2017-06-01

The asymmetric resonance responses of a thermally actuated silicon microcantilever of a portable, cantilever-based nanoparticle detector (Cantor) is analysed. For airborne nanoparticle concentration measurements, the cantilever is excited in its first in-plane bending mode by an integrated p-type heating actuator. The mass-sensitive nanoparticle (NP) detection is based on the resonance frequency (f0) shifting due to the deposition of NPs. A homemade phase-locked loop (PLL) circuit is developed for tracking of f0. For deflection sensing the cantilever contains an integrated piezo-resistive Wheatstone bridge (WB). A new fitting function based on the Fano resonance is proposed for analysing the asymmetric resonance curves including a method for calculating the quality factor Q from the fitting parameters. To obtain a better understanding, we introduce an electrical equivalent circuit diagram (ECD) comprising a series resonant circuit (SRC) for the cantilever resonator and voltage sources for the parasitics, which enables us to simulate the asymmetric resonance response and discuss the possible causes. Furthermore, we compare the frequency response of the on-chip thermal excitation with an external excitation using an in-plane piezo actuator revealing parasitic heating of the WB as the origin of the asymmetry. Moreover, we are able to model the phase component of the sensor output using the ECD. Knowing and understanding the phase response is crucial to the design of the PLL and thus the next generation of Cantor.

Artificial muscles with adjustable stiffness

NASA Astrophysics Data System (ADS)

Mutlu, Rahim; Alici, Gursel

2010-04-01

This paper reports on a stiffness enhancement methodology based on using a suitably designed contact surface with which cantilevered-type conducting polymer bending actuators are in contact during operation. The contact surface constrains the bending behaviour of the actuators. Depending on the topology of the contact surface, the resistance of the polymer actuators to deformation, i.e. stiffness, is varied. As opposed to their predecessors, these polymer actuators operate in air. Finite element analysis and modelling are used to quantify the effect of the contact surface on the effective stiffness of a trilayer cantilevered beam, which represents a one-end-free, the-other-end-fixed polypyrrole (PPy) conducting polymer actuator under a uniformly distributed load. After demonstrating the feasibility of the adjustable stiffness concept, experiments were conducted to determine the stiffness of bending-type conducting polymer actuators in contact with a range (20-40 mm in radius) of circular contact surfaces. The numerical and experimental results presented demonstrate that the stiffness of the actuators can be varied using a suitably profiled contact surface. The larger the radius of the contact surface is, the higher is the stiffness of the polymer actuators. The outcomes of this study suggest that, although the stiffness of the artificial muscles considered in this study is constant for a given geometric size, and electrical and chemical operation conditions, it can be changed in a nonlinear fashion to suit the stiffness requirement of a considered application. The stiffness enhancement methodology can be extended to other ionic-type conducting polymer actuators.

Polymeric variable optical attenuators based on magnetic sensitive stimuli materials

NASA Astrophysics Data System (ADS)

de Pedro, S.; Cadarso, V. J.; Ackermann, T. N.; Muñoz-Berbel, X.; Plaza, J. A.; Brugger, J.; Büttgenbach, S.; Llobera, A.

2014-12-01

Magnetically-actuable, polymer-based variable optical attenuators (VOA) are presented in this paper. The design comprises a cantilever which also plays the role of a waveguide and the input/output alignment elements for simple alignment, yet still rendering an efficient coupling. Magnetic properties have been conferred to these micro-opto-electromechanical systems (MOEMS) by implementing two different strategies: in the first case, a magnetic sensitive stimuli material (M-SSM) is obtained by a combination of polydimethylsiloxane (PDMS) and ferrofluid (FF) in ratios between 14.9 wt % and 29.9 wt %. An M-SSM strip under the waveguide-cantilever, defined with soft lithography (SLT), provides the required actuation capability. In the second case, specific volumes of FF are dispensed at the end of the cantilever tip (outside the waveguide) by means of inkjet printing (IJP), obtaining the required magnetic response while holding the optical transparency of the waveguide-cantilever. In the absence of a magnetic field, the waveguide-cantilever is aligned with the output fiber optics and thus the intrinsic optical losses can be obtained. Numerical simulations, validated experimentally, have shown that, for any cantilever length, the VOAs defined by IJP present lower intrinsic optical losses than their SLT counterparts. Under an applied magnetic field (Bapp), both VOA configurations experience a misalignment between the waveguide-cantilever and the output fiber optics. Thus, the proposed VOAs modulate the output power as a function of the cantilever displacement, which is proportional to Bapp. The experimental results for the three different waveguide-cantilever lengths and six different FF concentrations (three per technology) show maximum deflections of 220 µm at 29.9 wt % of FF for VOASLT and 250 µm at 22.3 wt % FF for VOAIJP, at 0.57 kG for both. These deflections provide maximum actuation losses of 16.1 dB and 18.9 dB for the VOASLT and VOAIJP, respectively.

Micro electro-mechanical system piezoelectric cantilever array for a broadband vibration energy harvester.

PubMed

Chun, Inwoo; Lee, Hyun-Woo; Kwon, Kwang-Ho

2014-12-01

Limited energy sources of ubiquitous sensor networks (USNs) such as fuel cells and batteries have grave drawbacks such as the need for replacements and re-charging owing to their short durability and environmental pollution. Energy harvesting which is converting environmental mechanical vibration into electrical energy has been researched with some piezoelectric materials and various cantilever designs to increase the efficiency of energy-harvesting devices. In this study, we focused on an energy-harvesting cantilever with a broadband vibration frequency. We fabricated a lead zirconate titanate (PZT) cantilever array with various Si proof masses on small beams (5.5 mm x 0.5 mm x 0.5 mm). We obtained broadband resonant frequencies ranging between 127 Hz and 136 Hz using a micro electro-mechanical system (MEMS) process. In order to obtain broadband resonant characteristics, the cantilever array was comprised of six cantilevers with different resonant frequencies. We obtained an output power of about 2.461 μW at an acceleration of 0.23 g and a resistance of 4 kΩ. The measured bandwidth of the resonant frequency was approximately 9 Hz (127-136 Hz), which is about six times wider than the bandwidth of a single cantilever.

Theoretical calculations and performance results of a PZT thin film actuator.

PubMed

Hoffmann, Marcus; Küppers, Hartmut; Schneller, Theodor; Böttger, Ulrich; Schnakenberg, Uwe; Mokwa, Wilfried; Waser, Rainer

2003-10-01

High piezoelectric coupling coefficients of PZT-based material systems can be employed for actuator functions in micro-electro-mechanical systems (MEMS) offering displacements and forces which outperform standard solutions. This paper presents simulation, fabrication, and development results of a stress-compensated, PZT-coated cantilever concept in which a silicon bulk micromachining process is used in combination with a chemical solution deposition (CSD) technique. Due to an analytical approach and a finite element method (FEM) simulation for a tip displacement of 10 microm, the actuator was designed with a cantilever length of 300 microm to 1000 microm. Special attention was given to the Zr/Ti ratio of the PZT thin films to obtain a high piezoelectric coefficient. For first characterizations X-ray diffraction (XRD), scanning electron microscopy (SEM), hysteresis-, current-voltage I(V)- and capacitance-voltage C(V)-measurements were carried out.

Development of the Aquarius Antenna Deployment Mechanisms and Spring/Damper Actuator

NASA Technical Reports Server (NTRS)

Johnson, Joel A.

2008-01-01

The Aquarius Instrument s large radar reflector dish needed to be stowed for launch, and then deployed on-orbit. The Deployment Subsystem consisted of a cantilevered boom structure and two single-axis hinge mechanisms to accurately deploy and position the reflector dish relative to the radar feed horns. The cantilevered design demanded high stiffness and accuracy from the deployment mechanism at the root of the boom. A preload-generating end-of-travel latch was also required. To largely eliminate the need for control systems, each deployment mechanism was actuated by a passive spring motor with viscous-fluid damping. Tough requirements and adaptation of a heritage actuator to the new application resulted in numerous challenges. Fabrication, assembly, and testing encountered additional problems, though ultimately the system was demonstrated very successfully. This paper revisits the development to highlight which design concepts worked and the many important lessons learned.

Externally resonated linear microvibromotor for microassembly

NASA Astrophysics Data System (ADS)

Saitou, Kazuhiro; Wou, Soungjin J.

1998-10-01

A new design of a linear micro vibromotor for on-substrate fine positioning of micro-scale components is presented where a micro linear slider is actuated by vibratory impacts exerted by micro cantilever impacters. These micro cantilever impacters are selectively resonated by shaking the entire substrate with a piezoelectric vibrator, requiring no need for built-in driving mechanisms such as electrostatic comb actuators as reported previously. This selective resonance of the micro cantilever impacters via an external vibration energy field provides with a very simple means of controlling forward and backward motion of the micro linear slider, facilitating assembly and disassembly of a micro component on a substrate. The double-V beam suspension design is employed in the micro cantilever impacters for larger displacement in the lateral direction while achieving higher stiffness in the transversal direction. An analytical model of the device is derived in order to obtain, through the Simulated Annealing algorithm, an optimal design which maximizes translation speed of the linear slider at desired external input frequencies. Prototypes of the externally-resonated linear micro vibromotor are fabricated using the three-layer polysilicon surface micro machining process provided by the MCNC MUMPS service.

CMOS micromachined capacitive cantilevers for mass sensing

NASA Astrophysics Data System (ADS)

Li, Ying-Chung; Ho, Meng-Han; Hung, Shi-Jie; Chen, Meng-Huei; S-C Lu, Michael

2006-12-01

In this paper, we present the design, fabrication and characterization of the CMOS micromachined cantilevers for mass sensing in the femtogram range. The cantilevers consisting of multiple metal and dielectric layers are fabricated after completion of a conventional CMOS process by dry etching steps. The cantilevers are electrostatically actuated to resonance by in-plane electrodes. The mechanical resonant frequency is detected capacitively with on-chip circuitry, where the modulation technique is applied to eliminate capacitive feedthrough from the driving port and to lessen the effect of flicker noise. The highest resonant frequency of the cantilevers is measured at 396.46 kHz with a quality factor of 2600 at 10 mTorr. The resonant frequency shift after deposition of a 0.1 µm SiO2 layer is 140 Hz, averaging 353 fg Hz-1.

Capacitively readout multi-element sensor array with common-mode cancellation

DOEpatents

Britton, Jr., Charles L.; Warmack, Robert J.; Bryan, William L.; Jones, Robert L.; Oden, Patrick Ian; Thundat, Thomas

2001-01-01

An improved multi-element apparatus for detecting the presence of at least one chemical, biological or physical component in a monitored area comprising an array or single set of the following elements: a capacitive transducer having at least one cantilever spring element secured thereto, the cantilever element having an area thereof coated with a chemical having an affinity for the component to be detected; a pick-up plate positioned adjacent to the cantilever element at a distance such that a capacitance between the cantilever element and the pick-up plate changes as the distance between the cantilever element and the pick-up plate varies, the change in capacitance being a measurable variation; a detection means for measuring the measurable variation in the capacitance between the cantilever element and the pick-up plate that forms a measurement channel signal; and at least one feedback cantilever spring element positioned apart from the coated cantilever element, the cantilever element substantially unaffected by the component being monitored and providing a reference channel signal to the detection means that achieves a common mode cancellation between the measurement channel signal and reference channel signal.

Dynamic characterization and microprocessor control of the NASA/UVA proof mass actuator

NASA Technical Reports Server (NTRS)

Zimmerman, D. C.; Inman, D. J.; Horner, G. C.

1984-01-01

The self-contained electromagnetic-reaction-type force-actuator system developed by NASA/UVA for the verification of spacecraft-structure vibration-control laws is characterized and demonstrated. The device is controlled by a dedicated microprocessor and has dynamic characteristics determined by Fourier analysis. Test data on a cantilevered beam are shown.

Innovative multi-cantilever array sensor system with MOEMS read-out

NASA Astrophysics Data System (ADS)

Ivaldi, F.; Bieniek, T.; Janus, P.; Grabiec, P.; Majstrzyk, W.; Kopiec, D.; Gotszalk, T.

2016-11-01

Cantilever based sensor system are a well-established sensor family exploited in several every-day life applications as well as in high-end research areas. The very high sensitivity of such systems and the possibility to design and functionalize the cantilevers to create purpose built and highly selective sensors have increased the interest of the scientific community and the industry in further exploiting this promising sensors type. Optical deflection detection systems for cantilever sensors provide a reliable, flexible method for reading information from cantilevers with the highest sensitivity. However the need of using multi-cantilever arrays in several fields of application such as medicine, biology or safety related areas, make the optical method less suitable due to its structural complexity. Working in the frame of a the Joint Undertaking project Lab4MEMS II our group proposes a novel and innovative approach to solve this issue, by integrating a Micro-Opto-Electro-Mechanical-System (MOEMS) with dedicated optics, electronics and software with a MOEMS micro-mirror, ultimately developed in the frame of Lab4MEMSII. In this way we are able to present a closely packed, lightweight solution combining the advantages of standard optical read-out systems with the possibility of recording multiple read-outs from large cantilever arrays quasi simultaneously.

Tapping mode imaging and measurements with an inverted atomic force microscope.

PubMed

Chan, Sandra S F; Green, John-Bruce D

2006-07-18

This report demonstrates the successful use of the inverted atomic force microscope (i-AFM) for tapping mode AFM imaging of cantilever-supported samples. i-AFM is a mode of AFM operation in which a sample supported on a tipless cantilever is imaged by one of many tips in a microfabricated tip array. Tapping mode is an intermittent contact mode whereby the cantilever is oscillated at or near its resonance frequency, and the amplitude and/or phase are used to image the sample. In the process of demonstrating that tapping mode images could be obtained in the i-AFM design, it was observed that the amplitude of the cantilever oscillation decreased markedly as the cantilever and tip array were approached. The source of this damping of the cantilever oscillations was identified to be the well-known "squeeze film damping", and the extent of damping was a direct consequence of the relatively shorter tip heights for the tip arrays, as compared to those of commercially available tapping mode cantilevers with integrated tips. The functional form for the distance dependence of the damping coefficient is in excellent agreement with previously published models for squeeze film damping, and the values for the fitting parameters make physical sense. Although the severe damping reduces the cantilever free amplitude substantially, we found that we were still able to access the low-amplitude regime of oscillation necessary for attractive tapping mode imaging of fragile molecules.

Piezoelectric energy harvesting in internal fluid flow.

PubMed

Lee, Hyeong Jae; Sherrit, Stewart; Tosi, Luis Phillipe; Walkemeyer, Phillip; Colonius, Tim

2015-10-14

We consider piezoelectric flow energy harvesting in an internal flow environment with the ultimate goal powering systems such as sensors in deep oil well applications. Fluid motion is coupled to structural vibration via a cantilever beam placed in a converging-diverging flow channel. Two designs were considered for the electromechanical coupling: first; the cantilever itself is a piezoelectric bimorph; second; the cantilever is mounted on a pair of flextensional actuators. We experimentally investigated varying the geometry of the flow passage and the flow rate. Experimental results revealed that the power generated from both designs was similar; producing as much as 20 mW at a flow rate of 20 L/min. The bimorph designs were prone to failure at the extremes of flow rates tested. Finite element analysis (FEA) showed fatigue failure was imminent due to stress concentrations near the bimorph's clamped region; and that robustness could be improved with a stepped-joint mounting design. A similar FEA model showed the flextensional-based harvester had a resonant frequency of around 375 Hz and an electromechanical coupling of 0.23 between the cantilever and flextensional actuators in a vacuum. These values; along with the power levels demonstrated; are significant steps toward building a system design that can eventually deliver power in the Watts range to devices down within a well.

Piezoelectric Energy Harvesting in Internal Fluid Flow

PubMed Central

Lee, Hyeong Jae; Sherrit, Stewart; Tosi, Luis Phillipe; Walkemeyer, Phillip; Colonius, Tim

2015-01-01

We consider piezoelectric flow energy harvesting in an internal flow environment with the ultimate goal powering systems such as sensors in deep oil well applications. Fluid motion is coupled to structural vibration via a cantilever beam placed in a converging-diverging flow channel. Two designs were considered for the electromechanical coupling: first; the cantilever itself is a piezoelectric bimorph; second; the cantilever is mounted on a pair of flextensional actuators. We experimentally investigated varying the geometry of the flow passage and the flow rate. Experimental results revealed that the power generated from both designs was similar; producing as much as 20 mW at a flow rate of 20 L/min. The bimorph designs were prone to failure at the extremes of flow rates tested. Finite element analysis (FEA) showed fatigue failure was imminent due to stress concentrations near the bimorph’s clamped region; and that robustness could be improved with a stepped-joint mounting design. A similar FEA model showed the flextensional-based harvester had a resonant frequency of around 375 Hz and an electromechanical coupling of 0.23 between the cantilever and flextensional actuators in a vacuum. These values; along with the power levels demonstrated; are significant steps toward building a system design that can eventually deliver power in the Watts range to devices down within a well. PMID:26473879

Rise Time Reduction of Thermal Actuators Operated in Air and Water through Optimized Pre-Shaped Open-Loop Driving.

PubMed

Larsen, T; Doll, J C; Loizeau, F; Hosseini, N; Peng, A W; Fantner, G; Ricci, A J; Pruitt, B L

2017-01-01

Electrothermal actuators have many advantages compared to other actuators used in Micro-Electro-Mechanical Systems (MEMS). They are simple to design, easy to fabricate and provide large displacements at low voltages. Low voltages enable less stringent passivation requirements for operation in liquid. Despite these advantages, thermal actuation is typically limited to a few kHz bandwidth when using step inputs due to its intrinsic thermal time constant. However, the use of pre-shaped input signals offers a route for reducing the rise time of these actuators by orders of magnitude. We started with an electrothermally actuated cantilever having an initial 10-90% rise time of 85 μs in air and 234 μs in water for a standard open-loop step input. We experimentally characterized the linearity and frequency response of the cantilever when operated in air and water, allowing us to obtain transfer functions for the two cases. We used these transfer functions, along with functions describing desired reduced rise-time system responses, to numerically simulate the required input signals. Using these pre-shaped input signals, we improved the open-loop 10-90% rise time from 85 μs to 3 μs in air and from 234 μs to 5 μs in water, an improvement by a factor of 28 and 47, respectively. Using this simple control strategy for MEMS electrothermal actuators makes them an attractive alternative to other high speed micromechanical actuators such as piezoelectric stacks or electrostatic comb structures which are more complex to design, fabricate, or operate.

Vibration measurement by atomic force microscopy with laser readout

NASA Astrophysics Data System (ADS)

Snitka, Valentinas J.; Mizariene, Vida; Kalinauskas, Margiris; Lucinskas, Paulius

1998-06-01

Micromachined cantilever beams are widely used for different microengineering and nanotechnology actuators and sensors applications. The micromechanical cantilever tip-based data storage devices with reading real data at the rates exceeding 1Mbit/s have been demonstrated. The vibrational noise spectrum of a cantilever limits the data storage resolution. Therefore the possibility to measure the microvibrations and acoustic fields in different micromachined devices are of great interest. We describe a method to study a micromechanical cantilever and surface vibrations based on laser beam deflection measurements. The influence of piezoelectric plate vibrations and the tip- surface contact condition on the cantilever vibrations were investigated in the frequency range of 1-200 kHz. The experiments were performed using the measurement results. The V-shaped cantilevers exited by the normal vibrations due to the non-linearity at the tip-surface contact vibrates with a complex motion and has a lateral vibration mode coupled with normal vibration mode. The possibility to use laser deflection technique for the vibration measurements in micromachined structures with nano resolution is shown.

Silicon Micromachined Sensor for Broadband Vibration Analysis

NASA Technical Reports Server (NTRS)

Gutierrez, Adolfo; Edmans, Daniel; Cormeau, Chris; Seidler, Gernot; Deangelis, Dave; Maby, Edward

1995-01-01

The development of a family of silicon based integrated vibration sensors capable of sensing mechanical resonances over a broad range of frequencies with minimal signal processing requirements is presented. Two basic general embodiments of the concept were designed and fabricated. The first design was structured around an array of cantilever beams and fabricated using the ARPA sponsored multi-user MEMS processing system (MUMPS) process at the Microelectronics Center of North Carolina (MCNC). As part of the design process for this first sensor, a comprehensive finite elements analysis of the resonant modes and stress distribution was performed using PATRAN. The dependence of strain distribution and resonant frequency response as a function of Young's modulus in the Poly-Si structural material was studied. Analytical models were also studied. In-house experimental characterization using optical interferometry techniques were performed under controlled low pressure conditions. A second design, intended to operate in a non-resonant mode and capable of broadband frequency response, was proposed and developed around the concept of a cantilever beam integrated with a feedback control loop to produce a null mode vibration sensor. A proprietary process was used to integrat a metal-oxide semiconductor (MOS) sensing device, with actuators and a cantilever beam, as part of a compatible process. Both devices, once incorporated as part of multifunction data acquisition and telemetry systems will constitute a useful system for NASA launch vibration monitoring operations. Satellite and other space structures can benefit from the sensor for mechanical condition monitoring functions.

Micromachine friction test apparatus

DOEpatents

deBoer, Maarten P.; Redmond, James M.; Michalske, Terry A.

2002-01-01

A microelectromechanical (MEM) friction test apparatus is disclosed for determining static or dynamic friction in MEM devices. The friction test apparatus, formed by surface micromachining, is based on a friction pad supported at one end of a cantilevered beam, with the friction pad overlying a contact pad formed on the substrate. A first electrostatic actuator can be used to bring a lower surface of the friction pad into contact with an upper surface of the contact pad with a controlled and adjustable force of contact. A second electrostatic actuator can then be used to bend the cantilevered beam, thereby shortening its length and generating a relative motion between the two contacting surfaces. The displacement of the cantilevered beam can be measured optically and used to determine the static or dynamic friction, including frictional losses and the coefficient of friction between the surfaces. The test apparatus can also be used to assess the reliability of rubbing surfaces in MEM devices by producing and measuring wear of those surfaces. Finally, the friction test apparatus, which is small in size, can be used as an in situ process quality tool for improving the fabrication of MEM devices.

Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection

NASA Astrophysics Data System (ADS)

Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Suryo Wasisto, Hutomo; Uhde, Erik; Peiner, Erwin

2017-06-01

In this paper, the asymmetric resonance frequency (f 0) responses of thermally in-plane excited silicon cantilevers for a pocket-sized, cantilever-based airborne nanoparticle detector (Cantor) are analysed. By measuring the shift of f 0 caused by the deposition of nanoparticles (NPs), the cantilevers are used as a microbalance. The cantilever sensors are low cost manufactured from silicon by bulk-micromachining techniques and contain an integrated p-type heating actuator and a sensing piezoresistive Wheatstone bridge. f 0 is tracked by a homemade phase-locked loop (PPL) for real-time measurements. To optimize the sensor performance, a new cantilever geometry was designed, fabricated and characterized by its frequency responses. The most significant characterisation parameters of our application are f 0 and the quality factor (Q), which have high influences on sensitivity and efficiency of the NP detector. Regarding the asymmetric resonance signal, a novel fitting function based on the Fano resonance replacing the conventionally used function of the simple harmonic oscillator and a method to calculate Q by its fitting parameters were developed for a quantitative evaluation. To obtain a better understanding of the resonance behaviours, we analysed the origin of the asymmetric line shapes. Therefore, we compared the frequency response of the on-chip thermal excitation with an external excitation using an in-plane piezo actuator. In correspondence to the Fano effect, we could reconstruct the measured resonance curves by coupling two signals with constant amplitude and the expected signal of the cantilever, respectively. Moreover, the phase of the measurement signal can be analysed by this method, which is important to understand the locking process of the PLL circuit. Besides the frequency analysis, experimental results and calibration measurements with different particle types are presented. Using the described analysis method, decent results to optimize a next generation of Cantor are expected.

Fully additive manufacture of a polymer cantilever with an embedded functional layer

NASA Astrophysics Data System (ADS)

Kanazawa, Shusuke; Kusaka, Yasuyuki; Horii, Yoshinori; Ushijima, Hirobumi

2018-03-01

In this paper, we report on an efficient and unique printing-based process for fabricating a cantilever structure with an embedded functional layer. The process is used to form a micro suspended structure via the one-batch transfer of stacked layers from a dummy substrate. The mechanism of the transfer process is clearly explained by the order of adhesion strengths of all interfaces. As a demonstration, a strain gauge which consisted of a polymer cantilever with an embedded conductive wire was successfully fabricated. It is expected that the proposed process will widely contribute to the efficient manufacture of useful sensors and actuators.

A contribution to the expansion of the applicability of electrostatic forces in micro transducers

NASA Astrophysics Data System (ADS)

Schenk, Harald; Conrad, Holger; Gaudet, Matthieu; Uhlig, Sebastian; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Schimmanz, Klaus

2017-02-01

Electrostatic actuation is highly efficient at micro and nanoscale. However, large deflection in common electrostatically driven MEMS requires large electrode separation and thus high driving voltages. To offer a solution to this problem we developed a novel electrostatic actuator class, which is based on a force-to-stress transformation in the periodically patterned upper layer of a silicon cantilever beam. We report on advances in the development of such electrostatic bending actuators. Several variants of a CMOS compatible and RoHS-directive compliant fabrication processes to fabricate vertical deflecting beams with a thickness of 30 μm are presented. A concept to extend the actuation space towards lateral deflecting elements is introduced. The fabricated and characterized vertical deflecting cantilever beam variants make use of a 0.2 μm electrode gap and achieve deflections of up to multiples of this value. Simulation results based on an FE-model applied to calculate the voltage dependent curvature for various actuator cell designs are presented. The calculated values show very good agreement with the experimentally determined voltage controlled actuation curvatures. Particular attention was paid to parasitic effects induced by small, sub micrometer, electrode gaps. This includes parasitic currents between the two electrode layers. No experimental hint was found that such effects significantly influence the curvature for a control voltage up to 45 V. The paper provides an outlook for the applicability of the technology based on specifically designed and fabricated actuators which allow for a large variety of motion patterns including out-of-plane and in-plane motion as well as membrane deformation and linear motion.

Label-free protein assay based on a nanomechanical cantilever array

NASA Astrophysics Data System (ADS)

Arntz, Y.; Seelig, J. D.; Lang, H. P.; Zhang, J.; Hunziker, P.; Ramseyer, J. P.; Meyer, E.; Hegner, M.; Gerber, Ch

2003-01-01

We demonstrate continuous label-free detection of two cardiac biomarker proteins (creatin kinase and myoglobin) using an array of microfabricated cantilevers functionalized with covalently anchored anti-creatin kinase and anti-myoglobin antibodies. This method allows biomarker proteins to be detected via measurement of surface stress generated by antigen-antibody molecular recognition. Reference cantilevers are used to eliminate thermal drifts, undesired chemical reactions and turbulences from injections of liquids by calculating differential deflection signals with respect to sensor cantilevers. The sensitivity achieved for myoglobin detection is below 20 µg ml-1. Both myoglobin and creatin kinase could be detected independently using cantilevers functionalized with the corresponding antibodies, in unspecific protein background. This approach permits the use of up to seven different antigen-antibody reactions simultaneously, including an additional thermomechanical and chemical in situ reference. Applications lie in the field of early and rapid diagnosis of acute myocardial infarction.

Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors

PubMed Central

Contreras, Javier; Costa, Daniel; Pereira, Sonia; Fortunato, Elvira; Martins, Rodrigo; Wierzbicki, Rafal; Heerlein, Holger; Ferreira, Isabel

2010-01-01

The movement of a micro cantilever was detected via a self constructed portable data acquisition prototype system which integrates a linear array of 32 1D amorphous silicon position sensitive detectors (PSD). The system was mounted on a microscope using a metal structure platform and the movement of the 30 μm wide by 400 μm long cantilever was tracked by analyzing the signals acquired by the 32 sensor array electronic readout system and the relevant data algorithm. The obtained results show a linear behavior of the photocurrent relating X and Y movement, with a non-linearity of about 3%, a spatial resolution of less than 2 μm along the lateral dimension of the sensor as well as of less than 3 μm along the perpendicular dimension of the sensor, when detecting just the micro-cantilever, and a spatial resolution of less than 1 μm when detecting the holding structure. PMID:22163648

Piezoceramic devices and PVDF films as sensors and actuators for intelligent structures

NASA Astrophysics Data System (ADS)

Hanagud, S.; Obal, M. W.; Calise, A. G.

The use of bonded piezoceramic sensors and piezoceramic actuators to control vibrations in structural dynamic systems is discussed. Equations for developing optimum control strategies are derived. An example of a cantilever beam is considered to illustrate the development procedure for optimal vibration control of structures by the use of piezoceramic sensors, actuators, and rate feedbacks with appropriate gains. Research areas and future directions are outlined, including dynamic coupling and constitutive equations; load and energy transfer; composite structures; optimal dynamic compensation; estimation and identification; and distributed control.

Vertical electrostatic force in MEMS cantilever IR sensor

NASA Astrophysics Data System (ADS)

Rezadad, Imen; Boroumand Azad, Javaneh; Smith, Evan M.; Alhasan, Ammar; Peale, Robert E.

2014-06-01

A MEMS cantilever IR detector that repetitively lifts from the surface under the influence of a saw-tooth electrostatic force, where the contact duty cycle is a measure of the absorbed IR radiation, is analyzed. The design is comprised of three parallel conducting plates. Fixed buried and surface plates are held at opposite potential. A moveable cantilever is biased the same as the surface plate. Calculations based on energy methods with position-dependent capacity and electrostatic induction coefficients demonstrate the upward sign of the force on the cantilever and determine the force magnitude. 2D finite element method calculations of the local fields confirm the sign of the force and determine its distribution across the cantilever. The upward force is maximized when the surface plate is slightly larger than the other two. The electrostatic repulsion is compared with Casimir sticking force to determine the maximum useful contact area. MEMS devices were fabricated and the vertical displacement of the cantilever was observed in a number of experiments. The approach may be applied also to MEMS actuators and micromirrors.

Enhanced quality factors and force sensitivity by attaching magnetic beads to cantilevers for atomic force microscopy in liquid

NASA Astrophysics Data System (ADS)

Hoof, Sebastian; Nand Gosvami, Nitya; Hoogenboom, Bart W.

2012-12-01

Dynamic-mode atomic force microscopy (AFM) in liquid remains complicated due to the strong viscous damping of the cantilever resonance. Here, we show that a high-quality resonance (Q >20) can be achieved in aqueous solution by attaching a microgram-bead at the end of the nanogram-cantilever. The resulting increase in cantilever mass causes the resonance frequency to drop significantly. However, the force sensitivity—as expressed via the minimum detectable force gradient—is hardly affected, because of the enhanced quality factor. Through the enhancement of the quality factor, the attached bead also reduces the relative importance of noise in the deflection detector. It can thus yield an improved signal-to-noise ratio when this detector noise is significant. We describe and analyze these effects for a set-up that includes magnetic actuation of the cantilevers and that can be easily implemented in any AFM system that is compatible with an inverted optical microscope.

Ytterbium-doped fibre laser Q-switched by a cantilever-type micro-mirror.

PubMed

Fabert, Marc; Desfarges-Berthelemot, Agnès; Kermène, Vincent; Crunteanu, Aurelian; Bouyge, David; Blondy, Pierre

2008-12-22

We present an Ytterbium fibre laser operating in the Q-switch regime by using a Micro- Opto- Electro- Mechanical System (MOEMS) of novel design. The cantilever-type micro-mirror is designed to generate short laser pulses with duration between 20 ns and 100 ns at repetition rates ranging from a few kilohertz up to 800 kHz. The bent profile of this new type of MOEMS ensures a high modulation rate of the laser cavity losses while keeping a high actuating frequency.

Actuating mechanism and design of a cylindrical traveling wave ultrasonic motor using cantilever type composite transducer.

PubMed

Liu, Yingxiang; Chen, Weishan; Liu, Junkao; Shi, Shengjun

2010-04-02

Ultrasonic motors (USM) are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the outside surface of cylinder, four longitudinal PZT ceramics are set between the cantilevers, and four bending PZT ceramics are set on each outside surface of cantilevers. Two degenerate flexural vibration modes spatially and temporally orthogonal to each other in the cylinder are excited by the composite transducer. In this new design, a single transducer can excite a flexural traveling wave in the cylinder. Thus, elliptical motions are achieved on the teeth. The actuating mechanism of proposed motor was analyzed. The stator was designed with FEM. The two vibration modes of stator were degenerated. Transient analysis was developed to gain the vibration characteristic of stator, and results indicate the motion trajectories of nodes on the teeth are nearly ellipses. The study results verify the feasibility of the proposed design. The wave excited in the cylinder isn't an ideal traveling wave, and the vibration amplitudes are inconsistent. The distortion of traveling wave is generated by the deformation of bending vibration mode of cylinder, which is caused by the coupling effect between the cylinder and transducer. Analysis results also prove that the objective motions of nodes on the teeth are three-dimensional vibrations. But, the vibration in axial direction is minute compared with the vibrations in circumferential and radial direction. The results of this paper can guide the development of this new type of motor.

Micro- and nanostructured electro-active polymer actuators as smart muscles for incontinence treatment

NASA Astrophysics Data System (ADS)

Osmani, Bekim; Töpper, Tino; Deschenaux, Christian; Nohava, Jiri; Weiss, Florian M.; Leung, Vanessa; Müller, Bert

2015-02-01

Treatments of severe incontinence are currently based on purely mechanical systems that generally result in revision after three to five years. Our goal is to develop a prototype acting in a natural-analogue manner as artificial muscle, which is based on electro-active polymers. Dielectric actuators have outstanding performances including millisecond response times, mechanical strains of more than 10 % and power to mass densities similar to natural muscles. They basically consist of polymer films sandwiched between two compliant electrodes. The incompressible but elastic polymer film transduces the electrical energy into mechanical work according to the Maxwell pressure. Available polymer films are micrometers thick and voltages as large as kV are necessary to obtain 10 % strain. For medical implants, polymer films should be nanometer thin to realize actuation below 48 V. The metallic electrodes have to be stretchable to follow the strain of 10 % and remain conductive. Recent results on the stress/strain behavior of anisotropic EAP-cantilevers have shown dependencies on metal electrode preparation. We have investigated tunable anisotropic micro- and nanostructures for metallic electrodes. They show a preferred actuation direction with improved stress-strain behavior. The bending of the cantilever has been characterized by the laser beam deflection method. The impact of the electrode on the effective Young's Modulus is measured using an Ultra Nanoindentation Tester with an integrated reference system for soft polymer surfaces. Once ten thousand layers of nanometer-thin EAP actuators are available, devices beyond the envisioned application will flood the market.

Optical pendulum generator based on photomechanical liquid-crystalline actuators.

PubMed

Tang, Rong; Liu, Ziyi; Xu, Dandan; Liu, Jian; Yu, Li; Yu, Haifeng

2015-04-29

For converting light energy into electricity, an optical pendulum generator was designed by combining photomechanical movement of liquid-crystalline actuator (LCA) with Faraday's law of electromagnetic induction. Bilayer cantilever actuators were first fabricated with LDPE and LCA. Their photomechanical movement drove the attached copper coils to cut magnetic line of force generating electricity. The output electricity was proportional to the changing rate of the magnetic flux, which was greatly influenced by light intensity, film thickness, and sample size. Continuous electrical output was also achieved. This simple strategy may expand applications of photoactive materials in the capture and storage of light energy.

Motion planning for an adaptive wing structure with macro-fiber composite actuators

NASA Astrophysics Data System (ADS)

Schröck, J.; Meurer, T.; Kugi, A.

2009-05-01

A systematic approach for flatness-based motion planning and feedforward control is presented for the transient shaping of a piezo-actuated rectangular cantilevered plate modeling an adaptive wing. In the first step the consideration of an idealized infinite-dimensional input allows to determine the state and input parametrization in terms of a flat or basic output, which is used for a systematic motion planning approach. Subsequently, the obtained idealized input function is projected onto a finite number of suitably placed Macro-fiber Composite (MFC) patch actuators. The tracking performance of the proposed approach is evaluated in a simulation scenario.

Architecture for distributed actuation and sensing using smart piezoelectric elements

NASA Astrophysics Data System (ADS)

Etienne-Cummings, Ralph; Pourboghrat, Farzad; Maruboyina, Hari K.; Abrate, Serge; Dhali, Shirshak K.

1998-07-01

We discuss vibration control of a cantilevered plate with multiple sensors and actuators. An architecture is chosen to minimize the number of control and sensing wires required. A custom VLSI chip, integrated with the sensor/actuator elements, controls the local behavior of the plate. All the actuators are addressed in parallel; local decode logic selects which actuator is stimulated. Downloaded binary data controls the applied voltage and modulation frequency for each actuator, and High Voltage MOSFETs are used to activate them. The sensors, which are independent adjacent piezoelectric ceramic elements, can be accessed in a random or sequential manner. An A/D card and GPIB interconnected test equipment allow a PC to read the sensors' outputs and dictate the actuation procedure. A visual programming environment is used to integrate the sensors, controller and actuators. Based on the constitutive relations for the piezoelectric material, simple models for the sensors and actuators are derived. A two level hierarchical robust controller is derived for motion control and for damping of vibrations.

Vibrational behavior of adaptive aircraft wing structures modelled as composite thin-walled beams

NASA Technical Reports Server (NTRS)

Song, O.; Librescu, L.; Rogers, C. A.

1992-01-01

The vibrational behavior of cantilevered aircraft wings modeled as thin-walled beams and incorporating piezoelectric effects is studied. Based on the converse piezoelectric effect, the system of piezoelectric actuators conveniently located on the wing yield the control of its associated vertical and lateral bending eigenfrequencies. The possibility revealed by this study enabling one to increase adaptively the eigenfrequencies of thin-walled cantilevered beams could play a significant role in the control of the dynamic response and flutter of wing and rotor blade structures.

Study of wire electrical discharge machined folded-up corner cube retroreflector with a tunable cantilever beam

NASA Astrophysics Data System (ADS)

Chen, Yu-Fan; Wang, Yen-Hung; Tsai, Jui-che

2018-03-01

This work has developed an approach to construct a corner cube retroreflector (CCR). A two-dimensional cutout pattern is first fabricated with wire electrical discharge machining process. It is then folded up into a three-dimensional CCR suspended on a cantilever beam. The folded-up CCR may be driven through external actuators for optical modulation; it can also mechanically respond to perturbation, acceleration, etc., to function as a sensor. Mechanical (static and dynamic modeling) and optical (ray tracing) analyses are also performed.

Improved process for forming a three-dimensional undersurface on a printed cantilever

NASA Astrophysics Data System (ADS)

Kanazawa, Shusuke; Kusaka, Yasuyuki; Yamamoto, Noritaka; Ushijima, Hirobumi

2018-05-01

An improvement in the lift-on offset printing process is reported as a means of enabling the structural customization of hollow structures used as moving parts of sensors and actuators. The improved process can add structures to the underside of a hollow structure by modifying the preparation of the pre-structure. As a demonstration, the mechanical displacement of a cantilever in a gravitational acceleration sensor was enhanced by the addition of a proof mass. The improved process can be expected to further produce functionalized hollow structures by an efficient manufacturing process.

NiMnGa/Si Shape Memory Bimorph Nanoactuation

NASA Astrophysics Data System (ADS)

Lambrecht, Franziska; Lay, Christian; Aseguinolaza, Iván R.; Chernenko, Volodymyr; Kohl, Manfred

2016-12-01

The size dependences of thermal bimorph and shape memory effect of nanoscale shape memory alloy (SMA)/Si bimorph actuators are investigated in situ in a scanning electron microscope and by finite element simulations. By combining silicon nanomachining and magnetron sputtering, freestanding NiMnGa/Si bimorph cantilever structures with film/substrate thickness of 200/250 nm and decreasing lateral dimensions are fabricated. Electrical resistance and mechanical beam bending tests upon direct Joule heating demonstrate martensitic phase transformation and reversible thermal bimorph effect, respectively. Corresponding characteristics are strongly affected by the large temperature gradient in the order of 50 K/µm forming along the nano bimorph cantilever upon electro-thermal actuation, which, in addition, depends on the size-dependent heat conductivity in the Si nano layer. Furthermore, the martensitic transformation temperatures show a size-dependent decrease by about 40 K for decreasing lateral dimensions down to 200 nm. The effects of heating temperature and stress distribution on the nanoactuation performance are analyzed by finite element simulations revealing thickness ratio of SMA/Si of 90/250 nm to achieve an optimum SME. Differential thermal expansion and thermo-elastic effects are discriminated by comparative measurements and simulations on Ni/Si bimorph reference actuators.

Piezoresistive cantilever force-clamp system

DOE Office of Scientific and Technical Information (OSTI.GOV)

Park, Sung-Jin; Petzold, Bryan C.; Pruitt, Beth L.

2011-04-15

We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or ''clamps'' the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in capacitive sensor of a piezoelectric actuator as a displacement sensor, such that sample indentation depth can be directly calculated from the force and displacement signals. A programmable real-time controller operating at 100 kHz feedback calculates the driving voltage of the actuator. The system has two distinct modes: a force-clamp mode that controls the force applied to amore » sample and a displacement-clamp mode that controls the moving distance of the actuator. We demonstrate that the system has a large dynamic range (sub-nN up to tens of {mu}N force and nm up to tens of {mu}m displacement) in both air and water, and excellent dynamic response (fast response time, <2 ms and large bandwidth, 1 Hz up to 1 kHz). In addition, the system has been specifically designed to be integrated with other instruments such as a microscope with patch-clamp electronics. We demonstrate the capabilities of the system by using it to calibrate the stiffness and sensitivity of an electrostatic actuator and to measure the mechanics of a living, freely moving Caenorhabditis elegans nematode.« less

Piezoresistive cantilever force-clamp system

PubMed Central

Park, Sung-Jin; Petzold, Bryan C.; Goodman, Miriam B.; Pruitt, Beth L.

2011-01-01

We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or “clamps” the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in capacitive sensor of a piezoelectric actuator as a displacement sensor, such that sample indentation depth can be directly calculated from the force and displacement signals. A programmable real-time controller operating at 100 kHz feedback calculates the driving voltage of the actuator. The system has two distinct modes: a force-clamp mode that controls the force applied to a sample and a displacement-clamp mode that controls the moving distance of the actuator. We demonstrate that the system has a large dynamic range (sub-nN up to tens of μN force and nm up to tens of μm displacement) in both air and water, and excellent dynamic response (fast response time, <2 ms and large bandwidth, 1 Hz up to 1 kHz). In addition, the system has been specifically designed to be integrated with other instruments such as a microscope with patch-clamp electronics. We demonstrate the capabilities of the system by using it to calibrate the stiffness and sensitivity of an electrostatic actuator and to measure the mechanics of a living, freely moving Caenorhabditis elegans nematode. PMID:21529009

An ultra-sensitive DeltaR/R measurement system for biochemical sensors using piezoresistive micro-cantilevers.

PubMed

Nag, Sudip; Kale, Nitin S; Rao, V; Sharma, Dinesh K

2009-01-01

Piezoresistive micro-cantilevers are interesting bio-sensing tool whose base resistance value (R) changes by a few parts per million (DeltaR) in deflected conditions. Measuring such a small deviation is always being a challenge due to noise. An advanced and reliable DeltaR/R measurement scheme is presented in this paper which can sense resistance changes down to 6 parts per million. The measurement scheme includes the half-bridge connected micro-cantilevers with mismatch compensation, precision op-amp based filters and amplifiers, and a lock-in amplifier based detector. The input actuating sine wave is applied from a function generator and the output dc voltage is displayed on a digital multimeter. The calibration is performed and instrument sensitivity is calculated. An experimental set-up using a probe station is discussed that demonstrates a combined performance of the measurement system and SU8-polysilicon cantilevers. The deflection sensitivity of such polymeric cantilevers is calculated. The system will be highly useful to detect bio-markers such as myoglobin and troponin that are released in blood during or after heart attacks.

Hard-tip, soft-spring lithography.

PubMed

Shim, Wooyoung; Braunschweig, Adam B; Liao, Xing; Chai, Jinan; Lim, Jong Kuk; Zheng, Gengfeng; Mirkin, Chad A

2011-01-27

Nanofabrication strategies are becoming increasingly expensive and equipment-intensive, and consequently less accessible to researchers. As an alternative, scanning probe lithography has become a popular means of preparing nanoscale structures, in part owing to its relatively low cost and high resolution, and a registration accuracy that exceeds most existing technologies. However, increasing the throughput of cantilever-based scanning probe systems while maintaining their resolution and registration advantages has from the outset been a significant challenge. Even with impressive recent advances in cantilever array design, such arrays tend to be highly specialized for a given application, expensive, and often difficult to implement. It is therefore difficult to imagine commercially viable production methods based on scanning probe systems that rely on conventional cantilevers. Here we describe a low-cost and scalable cantilever-free tip-based nanopatterning method that uses an array of hard silicon tips mounted onto an elastomeric backing. This method-which we term hard-tip, soft-spring lithography-overcomes the throughput problems of cantilever-based scanning probe systems and the resolution limits imposed by the use of elastomeric stamps and tips: it is capable of delivering materials or energy to a surface to create arbitrary patterns of features with sub-50-nm resolution over centimetre-scale areas. We argue that hard-tip, soft-spring lithography is a versatile nanolithography strategy that should be widely adopted by academic and industrial researchers for rapid prototyping applications.

Multifunctional hydrogel nano-probes for atomic force microscopy

PubMed Central

Lee, Jae Seol; Song, Jungki; Kim, Seong Oh; Kim, Seokbeom; Lee, Wooju; Jackman, Joshua A.; Kim, Dongchoul; Cho, Nam-Joon; Lee, Jungchul

2016-01-01

Since the invention of the atomic force microscope (AFM) three decades ago, there have been numerous advances in its measurement capabilities. Curiously, throughout these developments, the fundamental nature of the force-sensing probe—the key actuating element—has remained largely unchanged. It is produced by long-established microfabrication etching strategies and typically composed of silicon-based materials. Here, we report a new class of photopolymerizable hydrogel nano-probes that are produced by bottom-up fabrication with compressible replica moulding. The hydrogel probes demonstrate excellent capabilities for AFM imaging and force measurement applications while enabling programmable, multifunctional capabilities based on compositionally adjustable mechanical properties and facile encapsulation of various nanomaterials. Taken together, the simple, fast and affordable manufacturing route and multifunctional capabilities of hydrogel AFM nano-probes highlight the potential of soft matter mechanical transducers in nanotechnology applications. The fabrication scheme can also be readily utilized to prepare hydrogel cantilevers, including in parallel arrays, for nanomechanical sensor devices. PMID:27199165

Piezoelectric Actuator Modeling Using MSC/NASTRAN and MATLAB

NASA Technical Reports Server (NTRS)

Reaves, Mercedes C.; Horta, Lucas G.

2003-01-01

This paper presents a procedure for modeling structures containing piezoelectric actuators using MSCMASTRAN and MATLAB. The paper describes the utility and functionality of one set of validated modeling tools. The tools described herein use MSCMASTRAN to model the structure with piezoelectric actuators and a thermally induced strain to model straining of the actuators due to an applied voltage field. MATLAB scripts are used to assemble the dynamic equations and to generate frequency response functions. The application of these tools is discussed using a cantilever aluminum beam with a surface mounted piezoelectric actuator as a sample problem. Software in the form of MSCINASTRAN DMAP input commands, MATLAB scripts, and a step-by-step procedure to solve the example problem are provided. Analysis results are generated in terms of frequency response functions from deflection and strain data as a function of input voltage to the actuator.

Note: Seesaw actuation of atomic force microscope probes for improved imaging bandwidth and displacement range

DOE Office of Scientific and Technical Information (OSTI.GOV)

Torun, H.; Torello, D.; Degertekin, F. L.

2011-08-15

The authors describe a method of actuation for atomic force microscope (AFM) probes to improve imaging speed and displacement range simultaneously. Unlike conventional piezoelectric tube actuation, the proposed method involves a lever and fulcrum ''seesaw'' like actuation mechanism that uses a small, fast piezoelectric transducer. The lever arm of the seesaw mechanism increases the apparent displacement range by an adjustable gain factor, overcoming the standard tradeoff between imaging speed and displacement range. Experimental characterization of a cantilever holder implementing the method is provided together with comparative line scans obtained with contact mode imaging. An imaging bandwidth of 30 kHz inmore » air with the current setup was demonstrated.« less

Micro-mechanics of ionic electroactive polymer actuators

NASA Astrophysics Data System (ADS)

Punning, Andres; Põldsalu, Inga; Kaasik, Friedrich; Vunder, Veiko; Aabloo, Alvo

2015-04-01

Commonly, modeling of the bending behavior of the ionic electroactive polymer (IEAP) actuators is based on the classical mechanics of cantilever beam. It is acknowledged, that the actuation of the ionic electroactive polymer (IEAP) actuators is symmetric about the centroid - the convex side of the actuator is expanding and the concave side is contracting for exactly the same amount, while the thickness of the actuator remains invariant. Actuating the IEAP actuators and sensors under scanning electron microscope (SEM), in situ, reveals that for some types of them this approach is incorrect. Comparison of the SEM micrographs using the Digital Image Correction (DIC) method results with the precise strain distribution of the IEAP actuators in two directions: in the axial direction, and in the direction of thickness. This information, in turn, points to the physical processes taking place within the electrodes as well as membrane of the trilayer laminate of sub-millimeter thickness. Comparison of the EAP materials, engaged as an actuator as well as a sensor, reveals considerable differences between the micro-mechanics of the two modes.

Micro- and nanostructured electro-active polymer actuators as smart muscles for incontinence treatment

DOE Office of Scientific and Technical Information (OSTI.GOV)

Osmani, Bekim, E-mail: bekim.osmani@unibas.ch, E-mail: tino.toepper@unibas.ch; Töpper, Tino, E-mail: bekim.osmani@unibas.ch, E-mail: tino.toepper@unibas.ch; Weiss, Florian M., E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch

2015-02-17

Treatments of severe incontinence are currently based on purely mechanical systems that generally result in revision after three to five years. Our goal is to develop a prototype acting in a natural-analogue manner as artificial muscle, which is based on electro-active polymers. Dielectric actuators have outstanding performances including millisecond response times, mechanical strains of more than 10 % and power to mass densities similar to natural muscles. They basically consist of polymer films sandwiched between two compliant electrodes. The incompressible but elastic polymer film transduces the electrical energy into mechanical work according to the Maxwell pressure. Available polymer films aremore » micrometers thick and voltages as large as kV are necessary to obtain 10 % strain. For medical implants, polymer films should be nanometer thin to realize actuation below 48 V. The metallic electrodes have to be stretchable to follow the strain of 10 % and remain conductive. Recent results on the stress/strain behavior of anisotropic EAP-cantilevers have shown dependencies on metal electrode preparation. We have investigated tunable anisotropic micro- and nanostructures for metallic electrodes. They show a preferred actuation direction with improved stress-strain behavior. The bending of the cantilever has been characterized by the laser beam deflection method. The impact of the electrode on the effective Young's Modulus is measured using an Ultra Nanoindentation Tester with an integrated reference system for soft polymer surfaces. Once ten thousand layers of nanometer-thin EAP actuators are available, devices beyond the envisioned application will flood the market.« less

Sensor to detect endothelialization on an active coronary stent

PubMed Central

2010-01-01

Background A serious complication with drug-eluting coronary stents is late thrombosis, caused by exposed stent struts not covered by endothelial cells in the healing process. Real-time detection of this healing process could guide physicians for more individualized anti-platelet therapy. Here we present work towards developing a sensor to detect this healing process. Sensors on several stent struts could give information about the heterogeneity of healing across the stent. Methods A piezoelectric microcantilever was insulated with parylene and demonstrated as an endothelialization detector for incorporation within an active coronary stent. After initial characterization, endothelial cells were plated onto the cantilever surface. After they attached to the surface, they caused an increase in mass, and thus a decrease in the resonant frequencies of the cantilever. This shift was then detected electrically with an LCR meter. The self-sensing, self-actuating cantilever does not require an external, optical detection system, thus allowing for implanted applications. Results A cell density of 1300 cells/mm2 on the cantilever surface is detected. Conclusions We have developed a self-actuating, self-sensing device for detecting the presence of endothelial cells on a surface. The device is biocompatible and functions reliably in ionic liquids, making it appropriate for implantable applications. This sensor can be placed along the struts of a coronary stent to detect when the struts have been covered with a layer of endothelial cells and are no longer available surfaces for clot formation. Anti-platelet therapy can be adjusted in real-time with respect to a patient's level of healing and hemorrhaging risks. PMID:21050471

Apertureless cantilever-free pen arrays for scanning photochemical printing.

PubMed

Zhou, Yu; Xie, Zhuang; Brown, Keith A; Park, Daniel J; Zhou, Xiaozhu; Chen, Peng-Cheng; Hirtz, Michael; Lin, Qing-Yuan; Dravid, Vinayak P; Schatz, George C; Zheng, Zijian; Mirkin, Chad A

2015-02-25

A novel, apertureless, cantilever-free pen array can be used for dual scanning photochemical and molecular printing. Serial writing with light is enabled by combining self-focusing pyramidal pens with an opaque backing between pens. The elastomeric pens also afford force-tuned illumination and simultaneous delivery of materials and optical energy. These attributes make the technique a promising candidate for maskless high-resolution photopatterning and combinatorial chemistry. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Microwave Power for Smart Membrane Actuators

NASA Technical Reports Server (NTRS)

Choi, Sang H.; Song, Kyo D.; Golembiewski, Walter T.; Chu, Sang-Hyon; King, Glen C.

2002-01-01

The concept of microwave-driven smart membrane actuators is envisioned as the best option to alleviate the complexity associated with hard-wired control circuitry. A large, ultra-light space structure, such as solar sails and Gossamer spacecrafts, requires a distribution of power into individual membrane actuators to control them in an effective way. A patch rectenna array with a high voltage output was developed to drive smart membrane actuators. Networked patch rectenna array receives and converts microwave power into a DC power for an array of smart actuators. To use microwave power effectively, the concept of a power allocation and distribution (PAD) circuit is developed and tested for networking a rectenna/actuator patch array. For the future development, the PAD circuit could be imbedded into a single embodiment of rectenna and actuator array with the thin-film microcircuit embodiment. Preliminary design and fabrication of PAD circuitry that consists of a sixteen nodal elements were made for laboratory testing.

Electrothermal actuators fabricated in four-level planarized surface-miromachined polycrystalline silicon

DOE Office of Scientific and Technical Information (OSTI.GOV)

Comtois, J.H.; Michalicek, A.; Barron, C.C.

1997-11-01

This paper presents the results of tests performed on a variety of electrochemical microactuators and arrays of these actuators fabricated in the SUMMiT process at the U.S. Department of Energy`s Sandia National Laboratories. These results are intended to aid designers of thermally actuated mechanisms, and they apply to similar actuators made in other polysilicon MEMS processes such as the MUMPS process. Measurements include force and deflection versus input power, maximum operating frequency, effects of long term operation, and ideal actuator and array geometries for different applications` force requirements. Also, different methods of arraying these actuators together are compared. It ismore » found that a method using rotary joints, enabled by the advanced features of the SUMMiT fabrication process, is the most efficient array design. The design and operation of a thermally actuated stepper motor is explained to illustrate a useful application of these arrays.« less

A high-sensitive static vector magnetometer based on two vibrating coils

NASA Astrophysics Data System (ADS)

Yin, Jing; Pan, Cheng Liang; Wang, Hong Bo; Feng, Zhi Hua

2011-12-01

A static vector magnetometer based on two-dimensional (2D) vibrating coils actuated by a piezoelectric cantilever is presented. Two individual sensing coils are orthogonally fastened at the tip of cantilever and piezoelectric sheets are used to excite the cantilever bending. Due to off-axis coupler on the tip, the cantilever generates bending and twisting vibrations simultaneously on their corresponding resonant frequencies, realizing the 2D rotating vibrations of the coils. According to Faraday-Lenz Law, output voltages are induced from the coils. They are amplified by a pre-amplifier circuit, decoupled by a phase-sensitive detector, and finally used to calculate the vector of magnetic field at the coil location. The coil head of a prototype magnetometer possesses a dc sensitivity of around 10 μV/Gs with a good linearity in the measuring range from 0 to 16 μT. The corresponding noise level is about 13.1 nT in the bandwidth from 0.01 Hz to 1 Hz.

Free-vibration characteristics of a large split-blanket solar array in a 1-g field

NASA Technical Reports Server (NTRS)

Shaker, F. J.

1976-01-01

Two methods for studying the free vibration characteristics of a large split blanket solar array in both a 0-g and a 1-g cantilevered configuration are presented. The 0-g configuration corresponds to an in-orbit configuration of the array; the 1-g configuration is a typical ground test configuration. The first method applies the equations of continuum mechanics to determine the mode shapes and frequencies of the array; the second method uses the Rayleigh-Ritz approach. In the Rayleigh-Ritz method the array displacements are represented by string modes and cantilevered beam modes. The results of this investigation are summarized by a series of graphs illustrating the effects of various array parameters on the mode shapes and frequencies of the system. The results of the two methods are also compared in tabular form.

Micromechanical contact stiffness devices and application for calibrating contact resonance atomic force microscopy.

PubMed

Rosenberger, Matthew R; Chen, Sihan; Prater, Craig B; King, William P

2017-01-27

This paper reports the design, fabrication, and characterization of micromechanical devices that can present an engineered contact stiffness to an atomic force microscope (AFM) cantilever tip. These devices allow the contact stiffness between the AFM tip and a substrate to be easily and accurately measured, and can be used to calibrate the cantilever for subsequent mechanical property measurements. The contact stiffness devices are rigid copper disks of diameters 2-18 μm integrated onto a soft silicone substrate. Analytical modeling and finite element simulations predict the elastic response of the devices. Measurements of tip-sample interactions during quasi-static force measurements compare well with modeling simulation, confirming the expected elastic response of the devices, which are shown to have contact stiffness 32-156 N m -1 . To demonstrate one application, we use the disk sample to calibrate three resonant modes of a U-shaped AFM cantilever actuated via Lorentz force, at approximately 220, 450, and 1200 kHz. We then use the calibrated cantilever to determine the contact stiffness and elastic modulus of three polymer samples at these modes. The overall approach allows cantilever calibration without prior knowledge of the cantilever geometry or its resonance modes, and could be broadly applied to both static and dynamic measurements that require AFM calibration against a known contact stiffness.

Micromechanical contact stiffness devices and application for calibrating contact resonance atomic force microscopy

NASA Astrophysics Data System (ADS)

Rosenberger, Matthew R.; Chen, Sihan; Prater, Craig B.; King, William P.

2017-01-01

This paper reports the design, fabrication, and characterization of micromechanical devices that can present an engineered contact stiffness to an atomic force microscope (AFM) cantilever tip. These devices allow the contact stiffness between the AFM tip and a substrate to be easily and accurately measured, and can be used to calibrate the cantilever for subsequent mechanical property measurements. The contact stiffness devices are rigid copper disks of diameters 2-18 μm integrated onto a soft silicone substrate. Analytical modeling and finite element simulations predict the elastic response of the devices. Measurements of tip-sample interactions during quasi-static force measurements compare well with modeling simulation, confirming the expected elastic response of the devices, which are shown to have contact stiffness 32-156 N m-1. To demonstrate one application, we use the disk sample to calibrate three resonant modes of a U-shaped AFM cantilever actuated via Lorentz force, at approximately 220, 450, and 1200 kHz. We then use the calibrated cantilever to determine the contact stiffness and elastic modulus of three polymer samples at these modes. The overall approach allows cantilever calibration without prior knowledge of the cantilever geometry or its resonance modes, and could be broadly applied to both static and dynamic measurements that require AFM calibration against a known contact stiffness.

Electrostatic micromembrane actuator arrays as motion generator

NASA Astrophysics Data System (ADS)

Wu, X. T.; Hui, J.; Young, M.; Kayatta, P.; Wong, J.; Kennith, D.; Zhe, J.; Warde, C.

2004-05-01

A rigid-body motion generator based on an array of micromembrane actuators is described. Unlike previous microelectromechanical systems (MEMS) techniques, the architecture employs a large number (typically greater than 1000) of micron-sized (10-200 μm) membrane actuators to simultaneously generate the displacement of a large rigid body, such as a conventional optical mirror. For optical applications, the approach provides optical design freedom of MEMS mirrors by enabling large-aperture mirrors to be driven electrostatically by MEMS actuators. The micromembrane actuator arrays have been built using a stacked architecture similar to that employed in the Multiuser MEMS Process (MUMPS), and the motion transfer from the arrayed micron-sized actuators to macro-sized components was demonstrated.

Microfabricated Cantilevers Based on Sputtered Thin-Film Ni50Ti50 Shape Memory Alloy (SMA)

DTIC Science & Technology

2015-08-01

surface coating developed during the NiTi deposition or anneal that is relatively resistant to the wet etch. Fig. 2 SEMs after the NiTi wet -etch...SEMs of NiTi devices after the 600 °C anneal , wet -etch patterning of the NiTi. A 120-nm Au capping layer was also sputtered. Figure 3a shows a 200-nm...Ni50Ti50 Cantilever 2 3. Results and Discussion 3 3.1 Wet -Etch Patterning NiTi 3 3.2 Dry-Etch Release of NiTi Devices 5 3.3 Thermal Actuation of

Actuating Mechanism and Design of a Cylindrical Traveling Wave Ultrasonic Motor Using Cantilever Type Composite Transducer

PubMed Central

Liu, Yingxiang; Chen, Weishan; Liu, Junkao; Shi, Shengjun

2010-01-01

Background Ultrasonic motors (USM) are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. Principal Findings A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the outside surface of cylinder, four longitudinal PZT ceramics are set between the cantilevers, and four bending PZT ceramics are set on each outside surface of cantilevers. Two degenerate flexural vibration modes spatially and temporally orthogonal to each other in the cylinder are excited by the composite transducer. In this new design, a single transducer can excite a flexural traveling wave in the cylinder. Thus, elliptical motions are achieved on the teeth. The actuating mechanism of proposed motor was analyzed. The stator was designed with FEM. The two vibration modes of stator were degenerated. Transient analysis was developed to gain the vibration characteristic of stator, and results indicate the motion trajectories of nodes on the teeth are nearly ellipses. Conclusions The study results verify the feasibility of the proposed design. The wave excited in the cylinder isn't an ideal traveling wave, and the vibration amplitudes are inconsistent. The distortion of traveling wave is generated by the deformation of bending vibration mode of cylinder, which is caused by the coupling effect between the cylinder and transducer. Analysis results also prove that the objective motions of nodes on the teeth are three-dimensional vibrations. But, the vibration in axial direction is minute compared with the vibrations in circumferential and radial direction. The results of this paper can guide the development of this new type of motor. PMID:20368809

Networked Rectenna Array for Smart Material Actuators

NASA Technical Reports Server (NTRS)

Choi, Sang H.; Golembiewski, Walter T.; Song, Kyo D.

2000-01-01

The concept of microwave-driven smart material actuators is envisioned as the best option to alleviate the complexity associated with hard-wired control circuitry. Networked rectenna patch array receives and converts microwave power into a DC power for an array of smart actuators. To use microwave power effectively, the concept of a power allocation and distribution (PAD) circuit is adopted for networking a rectenna/actuator patch array. The PAD circuit is imbedded into a single embodiment of rectenna and actuator array. The thin-film microcircuit embodiment of PAD circuit adds insignificant amount of rigidity to membrane flexibility. Preliminary design and fabrication of PAD circuitry that consists of a few nodal elements were made for laboratory testing. The networked actuators were tested to correlate the network coupling effect, power allocation and distribution, and response time. The features of preliminary design are 16-channel computer control of actuators by a PCI board and the compensator for a power failure or leakage of one or more rectennas.

Fabrication of a self-sensing electroactive polymer bimorph actuator based on polyvinylidene fluoride and its electrostrictive terpolymer

NASA Astrophysics Data System (ADS)

Engel, Leeya; Van Volkinburg, Kyle R.; Ben-David, Moti; Washington, Gregory N.; Krylov, Slava; Shacham-Diamand, Yosi

2016-04-01

In this paper, we report on the fabrication of a self-sensing electroactive polymer cantilevered bimorph beam actuator and its frequency response. Tip deflections of the beam, induced by applying an AC signal across ferroelectric relaxor polyvinylidene fluoride-trifluoroethylene chlorotrifluoroethylene (P(VDF-TrFE-CTFE)), reached a magnitude of 350μm under a field of ~55MV/m and were recorded externally using a laser Doppler vibrometer (LDV). Deflections were determined simultaneously by applying a sensing model to the voltage measured across the bimorph's integrated layer of piezoelectric polymer polyvinylidene fluoride (PVDF). The sensing model treats the structure as a simple Euler- Bernoulli cantilevered beam with two distributed active elements represented through the use of generalized functions and offers a method through which real time tip deflection can be measured without the need for external visualization. When not being used as a sensing element, the PVDF layer can provide an additional means for actuation of the beam via the converse piezoelectric effect, resulting in bidirectional control of the beam's deflections. Integration of flexible sensing elements together with modeling of the electroactive polymer beam can benefit the developing field of polymer microactuators which have applications in soft robotics as "smart" prosthetics/implants, haptic displays, tools for less invasive surgery, and sensing.

Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticle mass

NASA Astrophysics Data System (ADS)

Wasisto, H. S.; Merzsch, S.; Stranz, A.; Waag, A.; Uhde, E.; Kirsch, I.; Salthammer, T.; Peiner, E.

2011-06-01

A silicon cantilever with slender geometry based Micro Electro Mechanical System (MEMS) for nanoparticles mass detection is presented in this work. The cantilever is actuated using a piezoactuator at the bottom end of the cantilever supporting frame. The oscillation of the microcantilever is detected by a self-sensing method utilizing an integrated full Wheatstone bridge as a piezoresistive strain gauge for signal read out. Fabricated piezoresistive cantilevers of 1.5 mm long, 30 μm wide and 25 μm thick have been employed. This self-sensing cantilever is used due to its simplicity, portability, high-sensitivity and low-cost batch microfabrication. In order to investigate air pollution sampling, a nanoparticles collection test of the piezoresistive cantilever sensor is performed in a sealed glass chamber with a stable carbon aerosol inside. The function principle of cantilever sensor is based on detecting the resonance frequency shift that is directly induced by an additional carbon nanoparticles mass deposited on it. The deposition of particles is enhanced by an electrostatic field. The frequency measurement is performed off-line under normal atmospheric conditions, before and after carbon nanoparticles sampling. The calculated equivalent mass-induced resonance frequency shift of the experiment is measured to be 11.78 +/- 0.01 ng and a mass sensitivity of 8.33 Hz/ng is obtained. The proposed sensor exhibits an effective mass of 2.63 μg, a resonance frequency of 43.92 kHz, and a quality factor of 1230.68 +/- 78.67. These results and analysis indicate that the proposed self-sensing piezoresistive silicon cantilever can offer the necessary potential for a mobile nanoparticles monitor.

MEMS-based silicon cantilevers with integrated electrothermal heaters for airborne ultrafine particle sensing

NASA Astrophysics Data System (ADS)

Wasisto, Hutomo Suryo; Merzsch, Stephan; Waag, Andreas; Peiner, Erwin

2013-05-01

The development of low-cost and low-power MEMS-based cantilever sensors for possible application in hand-held airborne ultrafine particle monitors is described in this work. The proposed resonant sensors are realized by silicon bulk micromachining technology with electrothermal excitation, piezoresistive frequency readout, and electrostatic particle collection elements integrated and constructed in the same sensor fabrication process step of boron diffusion. Built-in heating resistor and full Wheatstone bridge are set close to the cantilever clamp end for effective excitation and sensing, respectively, of beam deflection. Meanwhile, the particle collection electrode is located at the cantilever free end. A 300 μm-thick, phosphorus-doped silicon bulk wafer is used instead of silicon-on-insulator (SOI) as the starting material for the sensors to reduce the fabrication costs. To etch and release the cantilevers from the substrate, inductively coupled plasma (ICP) cryogenic dry etching is utilized. By controlling the etching parameters (e.g., temperature, oxygen content, and duration), cantilever structures with thicknesses down to 10 - 20 μm are yielded. In the sensor characterization, the heating resistor is heated and generating thermal waves which induce thermal expansion and further cause mechanical bending strain in the out-of-plane direction. A resonant frequency of 114.08 +/- 0.04 kHz and a quality factor of 1302 +/- 267 are measured in air for a fabricated rectangular cantilever (500x100x13.5 μm3). Owing to its low power consumption of a few milliwatts, this electrothermal cantilever is suitable for replacing the current external piezoelectric stack actuator in the next generation of the miniaturized cantilever-based nanoparticle detector (CANTOR).

Disposable cartridge biosensor platform for portable diagnostics

NASA Astrophysics Data System (ADS)

Yaras, Yusuf S.; Cakmak, Onur; Gunduz, Ali B.; Saglam, Gokhan; Olcer, Selim; Mostafazadeh, Aref; Baris, Ibrahim; Civitci, Fehmi; Yaralioglu, Goksen G.; Urey, Hakan

2017-03-01

We developed two types of cantilever-based biosensors for portable diagnostics applications. One sensor is based on MEMS cantilever chip mounted in a microfluidic channel and the other sensor is based on a movable optical fiber placed across a microfluidic channel. Both types of sensors were aimed at direct mechanical measurement of coagulation time in a disposable cartridge using plasma or whole blood samples. There are several similarities and also some important differences between the MEMS based and the optical fiber based solutions. The aim of this paper is to provide a comparison between the two solutions and the results. For both types of sensors, actuation of the cantilever or the moving fiber is achieved using an electro coil and the readout is optical. Since both the actuation and sensing are remote, no electrical connections are required for the cartridge. Therefore it is possible to build low cost disposable cartridges. The reader unit for the cartridge contains light sources, photodetectors, the electro coil, a heater, analog electronics, and a microprocessor. The reader unit has different optical interfaces for the cartridges that have MEMS cantilevers and moving fibers. MEMS based platform has better sensitivity but optomechanical alignment is a challenge and measurements with whole blood were not possible due to high scattering of light by the red blood cells. Fiber sensor based platform has relaxed optomechanical tolerances, ease of manufacturing, and it allows measurements in whole blood. Both sensors were tested using control plasma samples for activated-Partial-Thromboplastin-Time (aPTT) measurements. Control plasma test results matched with the manufacturer's datasheet. Optical fiber based system was tested for aPTT tests with human whole blood samples and the proposed platform provided repeatable test results making the system method of choice for portable diagnostics.

Principle design and actuation of a dual chamber electromagnetic micropump with coaxial cantilever valves.

PubMed

Zordan, Enrico; Amirouche, Farid; Zhou, Yu

2010-02-01

This paper deals with the design and characterization of an electromagnetic actuation micropump with superimposed dual chambers. An integral part of microfluidic system includes micropumps which have become a critical design focus and have the potential to alter treatment and drug delivery requirements to patients. In this paper, conceptual design of variable geometrical nozzle/diffuser elements, coaxial cantilever valve, is proposed. It takes advantages of cantilever fluctuating valves with preset geometry to optimize and control fluid flow. The integration of this conceptual valve into a dual chamber micropump has increased the flow rate when compared to a single chamber micropump. This technique also allows for the fluid flow to be actively controlled by adjusting the movement of the intermediate membrane and the cantilever valves due to their fast response and large deflection properties when subjected to an electromagnetic field. To ensure reliability and performance of both the membrane and electromagnets, finite element method was used to perform the stress-strain analysis and optimize the membrane structure and electromagnet configuration. The frequency-dependent flow rates and backpressure are investigated for different frequencies by varying the applied currents from 1A to 1.75A. The current micropump design exhibits a backpressure of 58 mmH(2)O and has a water flow rate that reaches maximum at 1.985 ml/s under a 1.75A current with a resonance frequency of 45 Hz. This proposed micropump while at its initial prototype stage can satisfy the requirements of wide flow rate drug delivery applications. Its controllability and process design are attractive for high volume fabrication and low cost.

Dual actuation micro-mirrors

NASA Astrophysics Data System (ADS)

Alneamy, A. M.; Khater, M. E.; Al-Ghamdi, M. S.; Park, S.; Heppler, G. R.; Abdel-Rahman, E. M.

2018-07-01

This paper investigates the performance of cantilever-type micro-mirrors under electromagnetic, electrostatic and dual actuation. We developed and validated a two-DOFs model of the coupled bending-torsion motions of the mirror and used it in conjunction with experiments in air and in vacuum to compare all three actuation methods. We found that electromagnetic actuation is the most effective delivering a scanning range of  ± out of a geometrically allowable range of  ± at a current amplitude i  =  3 mA and a magnetic field of B  =  30 mT. Electrostatic actuation, whether alone or in conjunction with electromagnetic actuation, limited the stable angular range to smaller values (as small as ) due to the presence of spurious piston motions. This is an innate characteristic of micro-scale electrostatic actuation, the electrostatic force and the undesirable piston motion grow faster than the electrostatic torque and the desired angular displacement as the voltage is increased and they limit the stable angular range. Finally, we found that the dual actuation can be used to design two-DOF mirrors where electromagnetic actuation drives angular motion for optical beam steering and electrostatic actuation drives piston motion to control the mirror focus.

Halbach array type focusing actuator for small and thin optical data storage device

NASA Astrophysics Data System (ADS)

Lee, Sung Q.; Park, Kang-Ho; Paek, Mun Chul

2004-09-01

The small form factor optical data storage devices are developing rapidly nowadays. Since it is designed for portable and compatibility with flesh memory, its components such as disk, head, focusing actuator, and spindle motor should be assembled within 5 mm. The thickness of focusing actuator is within 2 mm and the total working range is +/-100um, with the resolution of less than 1μm. Since the thickness is limited tightly, it is hard to place the yoke that closes the magnetic circuit and hard to make strong flux density without yoke. Therefore, Halbach array is adopted to increase the magnetic flux of one side without yoke. The proposed Halbach array type focusing actuator has the advantage of thin actuation structure with sacrificing less flex density than conventional magnetic array. The optical head unit is moved on the swing arm type tracking actuator. Focusing coil is attached to swing arm, and Halbach magnet array is positioned at the bottom of deck along the tracking line, and focusing actuator exerts force by the Fleming's left hand rule. The dynamics, working range, control resolution of focusing actuator are analyzed and performed.

Programmable optical microshutter arrays for large aspect ratio microslits

NASA Astrophysics Data System (ADS)

Ilias, S.; Picard, F.; Larouche, C.; Kruzelecky, R.; Jamroz, W.; Le Noc, L.; Topart, P.

2008-06-01

Design, fabrication and characterization of a 16x1 programmable microshutter array are described. Each shutter controls the light transmitted through a microslit defined on the transparent substrate supporting the array. Two approaches were considered for the shutter array implementation: sweeping blades and zipping actuators. Simulation results and fabrication constraints led to the selection of the zipping actuators. The device was fabricated using a surface micromachining process. Each microshutter is basically an electrostatic zipping actuator having a curved shape induced by a stress gradient throughout the actuator thickness. When a sufficient voltage is applied between the microshutter and an actuation electrode surrounding the microslit area, the generated electrostatic force pulls the actuator down to the substrate which closes the microslit. Opening the slit relies on the restoring force due to the actuator deformation. Microshutter arrays were fabricated successfully. High light transmission through the slit area is obtained with the actuator in the open position and excellent light blocking is observed when the shutter is closed. Static and dynamic responses of the device were determined. A pull-in voltage of about 110 V closes the microslit and the response times to close and open the microslit are about 2 and 7 ms, respectively.

A flexoelectric microelectromechanical system on silicon.

PubMed

Bhaskar, Umesh Kumar; Banerjee, Nirupam; Abdollahi, Amir; Wang, Zhe; Schlom, Darrell G; Rijnders, Guus; Catalan, Gustau

2016-03-01

Flexoelectricity allows a dielectric material to polarize in response to a mechanical bending moment and, conversely, to bend in response to an electric field. Compared with piezoelectricity, flexoelectricity is a weak effect of little practical significance in bulk materials. However, the roles can be reversed at the nanoscale. Here, we demonstrate that flexoelectricity is a viable route to lead-free microelectromechanical and nanoelectromechanical systems. Specifically, we have fabricated a silicon-compatible thin-film cantilever actuator with a single flexoelectrically active layer of strontium titanate with a figure of merit (curvature divided by electric field) of 3.33 MV(-1), comparable to that of state-of-the-art piezoelectric bimorph cantilevers.

A multifunctional force microscope for soft matter with in situ imaging

NASA Astrophysics Data System (ADS)

Roberts, Paul; Pilkington, Georgia A.; Wang, Yumo; Frechette, Joelle

2018-04-01

We present the multifunctional force microscope (MFM), a normal and lateral force-measuring instrument with in situ imaging. In the MFM, forces are calculated from the normal and lateral deflection of a cantilever as measured via fiber optic sensors. The motion of the cantilever is controlled normally by a linear micro-translation stage and a piezoelectric actuator, while the lateral motion of the sample is controlled by another linear micro-translation stage. The micro-translation stages allow for travel distances that span 25 mm with a minimum step size of 50 nm, while the piezo has a minimum step size of 0.2 nm, but a 100 μm maximum range. Custom-designed cantilevers allow for the forces to be measured over 4 orders of magnitude (from 50 μN to 1 N). We perform probe tack, friction, and hydrodynamic drainage experiments to demonstrate the sensitivity, versatility, and measurable force range of the instrument.

SU8 diaphragm micropump with monolithically integrated cantilever check valves.

PubMed

Ezkerra, Aitor; Fernández, Luis José; Mayora, Kepa; Ruano-López, Jesús Miguel

2011-10-07

This paper presents a SU8 unidirectional diaphragm micropump with embedded out-of-plane cantilever check valves. The device represents a reliable and low-cost solution for integration of microfluidic control in lab-on-a-chip devices. Its planar architecture allows monolithic definition of its components in a single step and potential integration with previously reported PCR, electrophoresis and flow-sensing SU8 microdevices. Pneumatic actuation is applied on a PDMS diaphragm, which is bonded to the SU8 body at wafer level, further enhancing its integration and mass production capabilities. The cantilever check valves move synchronously with the diaphragm, feature fast response (10ms), low dead volume (86nl) and a 94% flow blockage up to 300kPa. The micropump achieves a maximum flow rate of 177 μl min(-1) at 6 Hz and 200 kPa with an effective area of 10 mm(2). The device is reliable, self-priming and tolerant to particles and big bubbles. To the knowledge of the authors, this is the first micropump in SU8 with monolithically integrated cantilever check valves.

Electrostatic and aerodynamic forced vibrations of a thin flexible electrode: Quasi-periodic vs. chaotic oscillations.

PubMed

Madanu, Sushma B; Barbel, Stanley I; Ward, Thomas

2016-06-01

In this paper, transverse vibrations of an electrostatically actuated thin flexible cantilever perturbed by low-speed air flow are studied using both experiments and numerical modeling. In the experiments, the dynamic characteristics of the cantilever are studied by supplying a DC voltage with an AC component for electrostatic forcing and a constant uniform air flow around the cantilever system for aerodynamic forcing. A range of control parameters leading to stable vibrations are established using a dimensionless operating parameter that is the ratio of the induced and the free stream velocities. Numerical results are validated with experimental data. Assuming the amplitude of vibrations are small, then a non-linear dynamic Euler-Bernoulli beam equation with viscous damping and gravitational effects is used to model the equation of motion. Aerodynamic forcing is modelled as a temporally sinusoidal and uniform force acting perpendicular to the beam length. The forcing amplitude is found to be proportional to the square of the air flow velocity. Numerical results strongly agree with the experiments predicting accurate vibration amplitude, displacement frequency, and quasi-periodic displacement of the cantilever tip.

A magnetic micro-manipulator for application of three dimensional forces

DOE Office of Scientific and Technical Information (OSTI.GOV)

Punyabrahma, P.; Jayanth, G. R.

2015-02-15

Magnetic manipulation finds diverse applications in actuation, characterization, and manipulation of micro- and nano-scale samples. This paper presents the design and development of a novel magnetic micro-manipulator for application of three-dimensional forces on a magnetic micro-bead. A simple analytical model is proposed to obtain the forces of interaction between the magnetic micro-manipulator and a magnetic micro-bead. Subsequently, guidelines are proposed to perform systematic design and analysis of the micro-manipulator. The designed micro-manipulator is fabricated and evaluated. The manipulator is experimentally demonstrated to possess an electrical bandwidth of about 1 MHz. The ability of the micro-manipulator to apply both in-plane andmore » out-of-plane forces is demonstrated by actuating permanent-magnet micro-beads attached to micro-cantilever beams. The deformations of the micro-cantilevers are also employed to calibrate the dependence of in-plane and out-of-plane forces on the position of the micro-bead relative to the micro-manipulator. The experimentally obtained dependences are found to agree well with theory.« less

Actuation of Piezoelectric Layered Beams With and Coupling.

PubMed

Nguyen, Cuong H; Hanke, Ulrik; Halvorsen, Einar

2018-05-01

In this paper, we derive and compare the linear static bending of piezoelectric actuators with transversal ( ) and longitudinal ( ) coupling. The transducers are, respectively, structures utilizing top and bottom electrodes (TBEs) and interdigitated electrodes (IDEs). While the theory is well developed for the TBE beam, governing equations for the bending of the piezoelectric beams with IDEs are far less developed. We improve on this by deriving the governing equation for the IDE beam with an arbitrary number of layers and with coupling consistently included. In addition, we introduce a phenomenological quadratic form for the nonuniform field that lets us derive a deflection formula with nontrivial effects of the field accounted for. The theory is applied to derive deflection formulas for both cantilever and clamped-clamped beams. All analytic results are validated with numerical simulations. From the analytic models, two different figures of merit (FOMs) are derived. We show that these FOMs are the same for cantilevers and doubly clamped beams. The analysis indicates the optimal transducer length for clamped-clamped beams and gives a criterion that can be used to determine which design concept ( or ) gives the largest deflection.

Strain-dependent characterization of electrode and polymer network of electrically activated polymer actuators

NASA Astrophysics Data System (ADS)

Töpper, Tino; Osmani, Bekim; Weiss, Florian M.; Winterhalter, Carla; Wohlfender, Fabian; Leung, Vanessa; Müller, Bert

2015-04-01

Fecal incontinence describes the involuntary loss of bowel content and affects about 45 % of retirement home residents and overall more than 12 % of the adult population. Artificial sphincter implants for treating incontinence are currently based on mechanical systems with failure rates resulting in revision after three to five years. To overcome this drawback, artificial muscle sphincters based on bio-mimetic electro-active polymer (EAP) actuators are under development. Such implants require polymer films that are nanometer-thin, allowing actuation below 24 V, and electrodes that are stretchable, remaining conductive at strains of about 10 %. Strain-dependent resistivity measurements reveal an enhanced conductivity of 10 nm compared to 30 nm sputtered Au on silicone for strains higher than 5 %. Thus, strain-dependent morphology characterization with optical microscopy and atomic force microscopy could demonstrate these phenomena. Cantilever bending measurements are utilized to determine elastic/viscoelastic properties of the EAP films as well as their long-term actuation behavior. Controlling these properties enables the adjustment of growth parameters of nanometer-thin EAP actuators.

Wavefront correction performed by a deformable mirror of arbitrary actuator pattern within a multireflection waveguide.

PubMed

Ma, Xingkun; Huang, Lei; Bian, Qi; Gong, Mali

2014-09-10

The wavefront correction ability of a deformable mirror with a multireflection waveguide was investigated and compared via simulations. By dividing a conventional actuator array into a multireflection waveguide that consisted of single-actuator units, an arbitrary actuator pattern could be achieved. A stochastic parallel perturbation algorithm was proposed to find the optimal actuator pattern for a particular aberration. Compared with conventional an actuator array, the multireflection waveguide showed significant advantages in correction of higher order aberrations.

Thermal, size and surface effects on the nonlinear pull-in of small-scale piezoelectric actuators

NASA Astrophysics Data System (ADS)

SoltanRezaee, Masoud; Ghazavi, Mohammad-Reza

2017-09-01

Electrostatically actuated miniature wires/tubes have many operational applications in the high-tech industries. In this research, the nonlinear pull-in instability of piezoelectric thermal small-scale switches subjected to Coulomb and dissipative forces is analyzed using strain gradient and modified couple stress theories. The discretized governing equation is solved numerically by means of the step-by-step linearization method. The correctness of the formulated model and solution procedure is validated through comparison with experimental and several theoretical results. Herein, the length-scale, surface energy, van der Waals attraction and nonlinear curvature are considered in the present comprehensive model and the thermo-electro-mechanical behavior of cantilever piezo-beams are discussed in detail. It is found that the piezoelectric actuation can be used as a design parameter to control the pull-in phenomenon. The obtained results are applicable in stability analysis, practical design and control of actuated miniature intelligent devices.

Micromirror structure actuated by TiNi shape memory thin films

NASA Astrophysics Data System (ADS)

Fu, Y. Q.; Luo, J. K.; Hu, M.; Du, H. J.; Flewitt, A. J.; Milne, W. I.

2005-10-01

TiNi films were deposited by co-sputtering TiNi and Ti targets. Results from differential scanning calorimetry and curvature measurement revealed martensitic transformation and shape memory effect upon heating and cooling. Two types of TiNi/Si micromirror structures with a Si mirror cap (40 µm thick) and TiNi/Si actuation beams were designed and fabricated. For the first design, a V-shaped cantilever based on the TiNi/Si bimorph structure was used as the actuation mechanism for the micromirror. In the second design, three elbow-shaped Si beams with TiNi electrodes were used as the arms to actuate the mirror. The TiNi/Si microbeams were flat at room temperature and bent up by applying voltage in the TiNi electrodes (due to phase transformation and shape memory effect), thus causing changes in angles of the micromirror.

A light writable microfluidic "flash memory": optically addressed actuator array with latched operation for microfluidic applications.

PubMed

Hua, Zhishan; Pal, Rohit; Srivannavit, Onnop; Burns, Mark A; Gulari, Erdogan

2008-03-01

This paper presents a novel optically addressed microactuator array (microfluidic "flash memory") with latched operation. Analogous to the address-data bus mediated memory address protocol in electronics, the microactuator array consists of individual phase-change based actuators addressed by localized heating through focused light patterns (address bus), which can be provided by a modified projector or high power laser pointer. A common pressure manifold (data bus) for the entire array is used to generate large deflections of the phase change actuators in the molten phase. The use of phase change material as the working media enables latched operation of the actuator array. After the initial light "writing" during which the phase is temporarily changed to molten, the actuated status is self-maintained by the solid phase of the actuator without power and pressure inputs. The microfluidic flash memory can be re-configured by a new light illumination pattern and common pressure signal. The proposed approach can achieve actuation of arbitrary units in a large-scale array without the need for complex external equipment such as solenoid valves and electrical modules, which leads to significantly simplified system implementation and compact system size. The proposed work therefore provides a flexible, energy-efficient, and low cost multiplexing solution for microfluidic applications based on physical displacements. As an example, the use of the latched microactuator array as "normally closed" or "normally open" microvalves is demonstrated. The phase-change wax is fully encapsulated and thus immune from contamination issues in fluidic environments.

Enhancing amplitude changes by mode localization in trio cantilevers with mass perturbation

NASA Astrophysics Data System (ADS)

Wang, Dong F.; Li, Xiaodong; Yang, Xu; Ikehara, Tsuyoshi; Maeda, Ryutaro

2015-09-01

A simplified three-cantilever array was designed and micro-fabricated for demonstrating the response enhancement in amplitude changes when applying small mass perturbations. Three micro-cantilevers, defined as side (outermost) cantilever, center cantilever and another side cantilever, are identical in geometry and are connected micro-mechanically with each other by two coupling overhangs. In the case of analytical characterizations, by applying a picogram order mass perturbation (10 pg) on one side cantilever, significant enhancements in amplitude changes were obtained at the 2nd resonance mode from both of the unloaded cantilevers. The amplitude change from the center cantilever is about 7000 times higher than that with no mass perturbation, while the change in amplitude from another side cantilever is about 4000 times higher. In the aspect of experimental characterizations, the enhancement in amplitude change at the 2nd resonance mode was verified by applying two polystyrene micro-spheres (about 8.8 pg) as a picogram order mass perturbation onto one side cantilever. Due to the operational difficulties in quantitatively manipulating polystyrene micro-spheres, the effects of mass variations on the enhancement in amplitude changes from unloaded cantilevers were further analytically characterized under a range of 0.01-100 pg for three resonance modes respectively. This work is the first comparative study using three identical spring-mass beams on both analytical characterizations by applying small mass perturbations and sensing verification by manipulating a picogram polystyrene micro-sphere.

Stochastic resonance in micro/nano cantilever sensors

NASA Astrophysics Data System (ADS)

Singh, Priyanka; Yadava, R. D. S.

2018-05-01

In this paper we present a comparative study on the stochastic resonance in micro/nano cantilever resonators due to fluctuations in the fundamental frequency or the damping coefficient. Considering DC+AC electrostatic actuation in the presence of zero-mean Gaussian noise with exponential autocorrelation we analyze stochastic resonance behaviors for the frequency and the damping fluctuations separately, and compare the effects of stochastic resonance on Q-factor of the resonators for different levels of damping losses. It is found that even though the stochastic resonance occurs for both types of fluctuations, only the damping fluctuation produces right cooperative influence on the fundamental resonance that improves both the amplitude response and the quality factor of the resonator.

Modelling of piezoelectric actuator dynamics for active structural control

NASA Technical Reports Server (NTRS)

Hagood, Nesbitt W.; Chung, Walter H.; Von Flotow, Andreas

1990-01-01

The paper models the effects of dynamic coupling between a structure and an electrical network through the piezoelectric effect. The coupled equations of motion of an arbitrary elastic structure with piezoelectric elements and passive electronics are derived. State space models are developed for three important cases: direct voltage driven electrodes, direct charge driven electrodes, and an indirect drive case where the piezoelectric electrodes are connected to an arbitrary electrical circuit with embedded voltage and current sources. The equations are applied to the case of a cantilevered beam with surface mounted piezoceramics and indirect voltage and current drive. The theoretical derivations are validated experimentally on an actively controlled cantilevered beam test article with indirect voltage drive.

Radio Frequency (RF) Micro-Electromechanical Systems (MEMS) Switches for Space Communications

NASA Technical Reports Server (NTRS)

Simons, Rainee N.; Ponchak, George E.; Scardelletti, Maximillian C.; Varaljay, Nicholas C.

2000-01-01

Micro-electromechanical systems (MEMS) is an emerging technology for radio frequency (RF) systems because it has the potential to dramatically decrease loss and improve efficiency. In this paper, we address the design and fabrication of novel MEMS switches being developed at NASA Glenn Research Center. Two types of switches are being developed: a microstrip series single pole single throw (SPST) switch and a coplanar waveguide (CPW) series SPST and single pole double throw (SPDT) switches. These are being fabricated as an integral part of 50 Ohm microstrip and CPW RF integrated circuits using microfabrication techniques. The construction of the switch relies on a cantilever beam that is partially supported by a dielectric post. The cantilever beam is electro-magnetically actuated. To decrease stiction, a Si3N4 thin film is deposited over the contact area. Thus, when the switch is closed, the ON-state insertion loss is governed by the parallel plate capacitance formed by the two contacts. The isolation in the OFF-state is governed by the parasitic capacitance when the cantilever is in the up position. RF MEMS switches have been demonstrated with 80% lower insertion loss than conventional solid state devices (GaAs Metal Semiconductor Field Effect Transistors (MESFETs) and Silicon PIN diodes) based switches. For example, a conventional GaAs five-bit phase shifter which is required for beam steering in a phased array antenna has approximately 7 dB of insertion loss at 26.5 GHz where as a comparable MEMS based phase shifter is expected to have only 2 dB of insertion loss. This translates into 56% lower power dissipation and therefore decreases the thermal load on the spacecraft and also reduces the power amplifier requirements. These benefits will enable NASA to build the next generation of deep space science crafts and micro/nano satellites.

High-throughput characterization of stresses in thin film materials libraries using Si cantilever array wafers and digital holographic microscopy.

PubMed

Lai, Y W; Hamann, S; Ehmann, M; Ludwig, A

2011-06-01

We report the development of an advanced high-throughput stress characterization method for thin film materials libraries sputter-deposited on micro-machined cantilever arrays consisting of around 1500 cantilevers on 4-inch silicon-on-insulator wafers. A low-cost custom-designed digital holographic microscope (DHM) is employed to simultaneously monitor the thin film thickness, the surface topography and the curvature of each of the cantilevers before and after deposition. The variation in stress state across the thin film materials library is then calculated by Stoney's equation based on the obtained radii of curvature of the cantilevers and film thicknesses. DHM with nanometer-scale out-of-plane resolution allows stress measurements in a wide range, at least from several MPa to several GPa. By using an automatic x-y translation stage, the local stresses within a 4-inch materials library are mapped with high accuracy within 10 min. The speed of measurement is greatly improved compared with the prior laser scanning approach that needs more than an hour of measuring time. A high-throughput stress measurement of an as-deposited Fe-Pd-W materials library was evaluated for demonstration. The fast characterization method is expected to accelerate the development of (functional) thin films, e.g., (magnetic) shape memory materials, whose functionality is greatly stress dependent. © 2011 American Institute of Physics

Cantilever arrayed blood pressure sensor for arterial applanation tonometry.

PubMed

Lee, Byeungleul; Jeong, Jinwoo; Kim, Jinseok; Kim, Bonghwan; Chun, Kukjin

2014-03-01

The authors developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulk-micromachining for the non-invasive and continuous measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in the resistance of the piezoresistor on a 5-microm-thick-arrayed perforated membrane and 20-microm-thick metal pads. The length and the width of the unit membrane are 210 and 310 microm, respectively. The width of the insensible zone between the adjacent units is only 10 microm. The resistance change over contact force was measured to verify the performance. The good linearity of the result confirmed that the polydimethylsiloxane package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The maximum measurement range and the resolution of the fabricated blood pressure sensor were greater than 900 mmHg (= 120 kPa) and less than 1 mmHg (= 133.3 Pa), respectively.

A highly aromatic and sulfonated ionomer for high elastic modulus ionic polymer membrane micro-actuators

NASA Astrophysics Data System (ADS)

Hatipoglu, Gokhan; Liu, Yang; Zhao, Ran; Yoonessi, Mitra; Tigelaar, Dean M.; Tadigadapa, Srinivas; Zhang, Q. M.

2012-05-01

A high modulus, sulfonated ionomer synthesized from 4,6-bis(4-hydroxyphenyl)-N,N-diphenyl-1,3,5-triazin-2-amine and 4,4‧-biphenol with bis(4-fluorophenyl)sulfone (DPA-PS:BP) is investigated for ionic polymer actuators. The uniqueness of DPA-PS:BP is that it can have a high ionic liquid (IL) uptake and consequently generates a high intrinsic strain response, which is >1.1% under 1.6 V while maintaining a high elastic modulus (i.e. 600 MPa for 65 vol% IL uptake). Moreover, such a high modulus of the active ionomer, originating from the highly aromatic backbone and side-chain-free structure, allows for the fabrication of free-standing thin film micro-actuators (down to 5 µm thickness) via the solution cast method and focused-ion-beam milling, which exhibits a much higher bending actuation, i.e. 43 µm tip displacement and 180 kPa blocking stress for a 200 µm long and 5 µm thick cantilever actuator, compared with the ionic actuators based on traditional ionomers such as Nafion, which has a much lower elastic modulus (50 MPa) and actuation strain.

Faster than the Speed of Hearing: Nanomechanical Force Probes Enable the Electromechanical Observation of Cochlear Hair Cells

PubMed Central

Doll, Joseph C.; Peng, Anthony W.; Ricci, Anthony J.; Pruitt, Beth L.

2012-01-01

Understanding the mechanisms responsible for our sense of hearing requires new tools for unprecedented stimulation and monitoring of sensory cell mechanotransduction at frequencies yet to be explored. We describe nanomechanical force probes designed to evoke mechanotransduction currents at up to 100kHz in living cells. High-speed force and displacement metrology is enabled by integrating piezoresistive sensors and piezoelectric actuators onto nanoscale cantilevers. The design, fabrication process, actuator performance and actuator-sensor crosstalk compensation results are presented. We demonstrate the measurement of mammalian cochlear hair cell mechanotransduction with simultaneous patch clamp recordings at unprecedented speeds. The probes can deliver mechanical stimuli with sub-10 μs rise times in water and are compatible with standard upright and inverted microscopes. PMID:23181721

Electrostatic and aerodynamic forced vibrations of a thin flexible electrode: Quasi-periodic vs. chaotic oscillations

DOE Office of Scientific and Technical Information (OSTI.GOV)

Madanu, Sushma B.; Barbel, Stanley I.; Ward, Thomas

In this paper, transverse vibrations of an electrostatically actuated thin flexible cantilever perturbed by low-speed air flow are studied using both experiments and numerical modeling. In the experiments, the dynamic characteristics of the cantilever are studied by supplying a DC voltage with an AC component for electrostatic forcing and a constant uniform air flow around the cantilever system for aerodynamic forcing. A range of control parameters leading to stable vibrations are established using a dimensionless operating parameter that is the ratio of the induced and the free stream velocities. Numerical results are validated with experimental data. Assuming the amplitude ofmore » vibrations are small, then a non-linear dynamic Euler-Bernoulli beam equation with viscous damping and gravitational effects is used to model the equation of motion. Aerodynamic forcing is modelled as a temporally sinusoidal and uniform force acting perpendicular to the beam length. The forcing amplitude is found to be proportional to the square of the air flow velocity. Numerical results strongly agree with the experiments predicting accurate vibration amplitude, displacement frequency, and quasi-periodic displacement of the cantilever tip.« less

Experimental Studies on Dynamic Vibration Absorber using Shape Memory Alloy (NiTi) Springs

NASA Astrophysics Data System (ADS)

Kumar, V. Raj; Kumar, M. B. Bharathi Raj; Kumar, M. Senthil

2011-10-01

Shape memory alloy (SMA) springs have been used as actuators in many applications although their use in the vibration control area is very recent. Since shape memory alloys differ from conventional alloy materials in many ways, the traditional design approach for springs is not completely suitable for designing SMA springs. Some vibration control concepts utilizing unique characteristics of SMA's will be presented in this paper. A dynamic vibration absorber (DVA) using shape memory alloy (SMA) actuator is developed for attenuation of vibration in a cantilever beam. The design procedure of the DVA is presented. The system consists of a cantilever beam which is considered to generate the real-time vibration using shaker. A SMA spring is used with a mass attached to its end. The stiffness of the SMA spring is dynamically varied in such a way to attenuate the vibration. Both simulation and experimentation are carried out using PID controller. The experiments were carried out by interfacing the experimental setup with a computer using LabVIEW software, Data acquisition and control are implemented using a PCI data acquisition card. Standard PID controllers have been used to control the vibration of the beam. Experimental results are used to demonstrate the effectiveness of the controllers designed and the usefulness of the proposed test platform by exciting the structure at resonance. In experimental setup, an accelerometer is used to measure the vibration which is fed to computer and correspondingly the SMA spring is actuated to change its stiffness to control the vibration. The results obtained illustrate that the developed DVA using SMA actuator is very effective in reducing structural response and have great potential to be an active vibration control medium.

Experimental Studies on Dynamic Vibration Absorber using Shape Memory Alloy (NiTi) Springs

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kumar, V. Raj; Kumar, M. B. Bharathi Raj; Kumar, M. Senthil

2011-10-20

Shape memory alloy (SMA) springs have been used as actuators in many applications although their use in the vibration control area is very recent. Since shape memory alloys differ from conventional alloy materials in many ways, the traditional design approach for springs is not completely suitable for designing SMA springs. Some vibration control concepts utilizing unique characteristics of SMA's will be presented in this paper.A dynamic vibration absorber (DVA) using shape memory alloy (SMA) actuator is developed for attenuation of vibration in a cantilever beam. The design procedure of the DVA is presented. The system consists of a cantilever beammore » which is considered to generate the real-time vibration using shaker. A SMA spring is used with a mass attached to its end. The stiffness of the SMA spring is dynamically varied in such a way to attenuate the vibration. Both simulation and experimentation are carried out using PID controller. The experiments were carried out by interfacing the experimental setup with a computer using LabVIEW software, Data acquisition and control are implemented using a PCI data acquisition card. Standard PID controllers have been used to control the vibration of the beam. Experimental results are used to demonstrate the effectiveness of the controllers designed and the usefulness of the proposed test platform by exciting the structure at resonance. In experimental setup, an accelerometer is used to measure the vibration which is fed to computer and correspondingly the SMA spring is actuated to change its stiffness to control the vibration. The results obtained illustrate that the developed DVA using SMA actuator is very effective in reducing structural response and have great potential to be an active vibration control medium.« less

a New ER Fluid Based Haptic Actuator System for Virtual Reality

NASA Astrophysics Data System (ADS)

Böse, H.; Baumann, M.; Monkman, G. J.; Egersdörfer, S.; Tunayar, A.; Freimuth, H.; Ermert, H.; Khaled, W.

The concept and some steps in the development of a new actuator system which enables the haptic perception of mechanically inhomogeneous virtual objects are introduced. The system consists of a two-dimensional planar array of actuator elements containing an electrorheological (ER) fluid. When a user presses his fingers onto the surface of the actuator array, he perceives locally variable resistance forces generated by vertical pistons which slide in the ER fluid through the gaps between electrode pairs. The voltage in each actuator element can be individually controlled by a novel sophisticated switching technology based on optoelectric gallium arsenide elements. The haptic information which is represented at the actuator array can be transferred from a corresponding sensor system based on ultrasonic elastography. The combined sensor-actuator system may serve as a technology platform for various applications in virtual reality, like telemedicine where the information on the consistency of tissue of a real patient is detected by the sensor part and recorded by the actuator part at a remote location.

Frequency Invariability of (Pb,La)(Zr,Ti)O₃ Antiferroelectric Thick-Film Micro-Cantilevers.

PubMed

An, Kun; Jin, Xuechen; Meng, Jiang; Li, Xiao; Ren, Yifeng

2018-05-13

Micro-electromechanical systems comprising antiferroelectric layers can offer both actuation and transduction to integrated technologies. Micro-cantilevers based on the (Pb 0.97 La 0.02 )(Zr 0.95 Ti 0.05 )O₃ (PLZT) antiferroelectric thick film are fabricated by the micro-nano manufacturing process, to utilize the effect of phase transition induced strain and sharp phase switch of antiferroelectric materials. When micro-cantilevers made of antiferroelectric thick films were driven by sweep voltages, there were two resonant peaks corresponding to the natural frequency shift from 27.8 to 27.0 kHz, before and after phase transition. This is the compensation principle for the PLZT micro-cantilever to tune the natural frequency by the amplitude modulation of driving voltage, rather than of frequency modulation. Considering the natural frequency shift about 0.8 kHz and the frequency tuning ability about 156 Hz/V before the phase transition, this can compensate the frequency shift caused by increasing temperature by tuning only the amplitude of driving voltage, when the ultrasonic micro-transducer made of antiferroelectric thick films works for such a long period. Therefore, antiferroelectric thick films with hetero-structures incorporated into PLZT micro-cantilevers not only require a lower driving voltage (no more than 40 V) than rival bulk piezoelectric ceramics, but also exhibit better performance of frequency invariability, based on the amplitude modulation.

Conformational Change of Bacteriorhodopsin Quantitatively Monitored by Microcantilever Sensors

PubMed Central

Braun, Thomas; Backmann, Natalija; Vögtli, Manuel; Bietsch, Alexander; Engel, Andreas; Lang, Hans-Peter; Gerber, Christoph; Hegner, Martin

2006-01-01

Bacteriorhodopsin proteoliposomes were used as a model system to explore the applicability of micromechanical cantilever arrays to detect conformational changes in membrane protein patches. The three main results of our study concern: 1), reliable functionalization of micromechanical cantilever arrays with proteoliposomes using ink jet spotting; 2), successful detection of the prosthetic retinal removal (bleaching) from the bacteriorhodopsin protein by measuring the induced nanomechanical surface stress change; and 3), the quantitative response thereof, which depends linearly on the amount of removed retinal. Our results show this technique to be a potential tool to measure membrane protein-based receptor-ligand interactions and conformational changes. PMID:16443650

Health monitoring of carbon cantilever using femtosecond laser inscribed FBG array in gradient-index CYTOP polymer fibre

NASA Astrophysics Data System (ADS)

Theodosiou, Antreas; Kalli, Kyriacos; Komodromos, Michael

2017-04-01

We report on the femtosecond laser inscription of a fibre Bragg grating array in multimode, gradient-index, CYTOP polymer optical fibre and its demonstration as a quasi-distributed sensor for cantilever health monitoring measurements. We exploit the key advantage of polymer optical fibres, having a significantly lower Young's modulus compared with silica fibres, for vibration measurements. We also modify the typical multi-mode Bragg grating spectrum through control of the femtosecond laser inscription process, thereby producing gratings having single peak wavelength spectra. The sensor array is used to recover the time-dependent, wavelength response from each Bragg grating sensor and extract the mode shape of the beam. The mode shapes of the beam were used to observe "damage" introduced to the cantilever by adding masses to its surface; adjusting the level of damage by using different weights and placing them at different point across the beam. We show that health monitoring measurements are feasible with polymer based fibre Bragg gratings. The accurate and rapid detection of damage points on structural beams and the damage level is an important parameter for improved maintenance and servicing of beams under load and for the prevention of long-term damage.

Inductrack III configuration--a maglev system for high loads

DOEpatents

Post, Richard F

2015-03-24

Inductrack III configurations are suited for use in transporting heavy freight loads. Inductrack III addresses a problem associated with the cantilevered track of the Inductrack II configuration. The use of a cantilevered track could present mechanical design problems in attempting to achieve a strong enough track system such that it would be capable of supporting very heavy loads. In Inductrack III, the levitating portion of the track can be supported uniformly from below, as the levitating Halbach array used on the moving vehicle is a single-sided one, thus does not require the cantilevered track as employed in Inductrack II.

Inductrack III configuration--a maglev system for high loads

DOEpatents

Post, Richard F

2013-11-12

Inductrack III configurations are suited for use in transporting heavy freight loads. Inductrack III addresses a problem associated with the cantilevered track of the Inductrack II configuration. The use of a cantilevered track could present mechanical design problems in attempting to achieve a strong enough track system such that it would be capable of supporting very heavy loads. In Inductrack III, the levitating portion of the track can be supported uniformly from below, as the levitating Halbach array used on the moving vehicle is a single-sided one, thus does not require the cantilevered track as employed in Inductrack II.

Push plate, mounting assembly, circuit board, and method of assembling thereof for ball grid array packages

DOE Office of Scientific and Technical Information (OSTI.GOV)

Vaughn, Mark R.; Montague, Stephen

A push plate that includes springs in the form of cantilever flexures and an inspection window is disclosed. The push plate provides a known, uniform, down force and minimal torque to a package to be tested. The cantilevers have a known, calculable down force producing stiffness. The window provides for viewing of the package during testing.

Analysis of the bending stiffness and adhesion effect in RF-MEMS structures

NASA Astrophysics Data System (ADS)

Birleanu, C.; Pustan, M.; Dudescu, C.; Merie, V.; Pintea, I.

2017-02-01

Microelectromechanical system (MEMS) is a special branch with a wide range of applications in sensing, switching and actuating devices. Designing the reliable MEMS for thin free-standing structures like as bridges and cantilevers requires understanding of the tribomechanical properties of the materials and structures. The effect of geometrical dimensions (cross-section dimensions and length) on mechanical and tribological behavior of free-standing MEMS structures made of electroplated gold was analyzed in this paper. Special attention was given to the dependences between stiffness and cantilever length and the dependences between bending stress and variable travel range of actuated load. The force position was moved from the beams free-end toward to the anchor. The tests were performed at room temperature (22°C) and relative humidity RH of 40% with a noise- and vibration-isolated and environment-controlled XE-70 AFM from Park Systems using the contact mode. Each measurement was repeated many times in order to improve the accuracy of the experimental results. The stiffness of a microcantilever varies if the position of the acting force is changed. The experimental results obtained were in good correlation with those obtained analytically.

Nanomechanical electric and electromagnetic field sensor

DOEpatents

Datskos, Panagiotis George; Lavrik, Nickolay

2015-03-24

The present invention provides a system for detecting and analyzing at least one of an electric field and an electromagnetic field. The system includes a micro/nanomechanical oscillator which oscillates in the presence of at least one of the electric field and the electromagnetic field. The micro/nanomechanical oscillator includes a dense array of cantilevers mounted to a substrate. A charge localized on a tip of each cantilever interacts with and oscillates in the presence of the electric and/or electromagnetic field. The system further includes a subsystem for recording the movement of the cantilever to extract information from the electric and/or electromagnetic field. The system further includes a means of adjusting a stiffness of the cantilever to heterodyne tune an operating frequency of the system over a frequency range.

Nonlinear piezoelectric devices for broadband air-flow energy harvesting

NASA Astrophysics Data System (ADS)

Bai, Y.; Havránek, Z.; Tofel, P.; Meggs, C.; Hughes, H.; Button, T. W.

2015-11-01

This paper presents preliminary work on an investigation of a nonlinear air-flow energy harvester integrating magnets and a piezoelectric cantilever array. Two individual piezoelectric cantilevers with the structure of free-standing multi-layer thick-films have been fabricated and assembled with a free-spinning fan. The cantilevers were attached with different tip masses thereby achieving separated resonant frequencies. Also, permanent magnets were fixed onto the blades of the fan as well as the tips of the cantilevers, in order to create nonlinear coupling and transfer fluidic movement into mechanical oscillation. The device has been tested in a wind tunnel. Bifurcations in the spectra of the blade rotation speed of the fan as a function of output voltage have been observed, and a bandwidth (blade rotation speed range) widening effect has been achieved.

Next-Generation Microshutter Arrays for Large-Format Imaging and Spectroscopy

NASA Technical Reports Server (NTRS)

Moseley, Samuel; Kutyrev, Alexander; Brown, Ari; Li, Mary

2012-01-01

A next-generation microshutter array, LArge Microshutter Array (LAMA), was developed as a multi-object field selector. LAMA consists of small-scaled microshutter arrays that can be combined to form large-scale microshutter array mosaics. Microshutter actuation is accomplished via electrostatic attraction between the shutter and a counter electrode, and 2D addressing can be accomplished by applying an electrostatic potential between a row of shutters and a column, orthogonal to the row, of counter electrodes. Microelectromechanical system (MEMS) technology is used to fabricate the microshutter arrays. The main feature of the microshutter device is to use a set of standard surface micromachining processes for device fabrication. Electrostatic actuation is used to eliminate the need for macromechanical magnet actuating components. A simplified electrostatic actuation with no macro components (e.g. moving magnets) required for actuation and latching of the shutters will make the microshutter arrays robust and less prone to mechanical failure. Smaller-size individual arrays will help to increase the yield and thus reduce the cost and improve robustness of the fabrication process. Reducing the size of the individual shutter array to about one square inch and building the large-scale mosaics by tiling these smaller-size arrays would further help to reduce the cost of the device due to the higher yield of smaller devices. The LAMA development is based on prior experience acquired while developing microshutter arrays for the James Webb Space Telescope (JWST), but it will have different features. The LAMA modular design permits large-format mosaicking to cover a field of view at least 50 times larger than JWST MSA. The LAMA electrostatic, instead of magnetic, actuation enables operation cycles at least 100 times faster and a mass significantly smaller compared to JWST MSA. Also, standard surface micromachining technology will simplify the fabrication process, increasing yield and reducing cost.

Microfabricated Electrical Connector for Atomic Force Microscopy Probes with Integrated Sensor/Actuator

NASA Astrophysics Data System (ADS)

Akiyama, Terunobu; Staufer, Urs; Rooij, Nico F. de

2002-06-01

A microfabricated, electrical connector is proposed for facilitating the mounting of atomic force microscopy (AFM) probes, which have an integrated sensor and/or actuator. Only a base chip, which acts as a socket, is permanently fixed onto a printed circuit board and electronically connected by standard wire bonding. The AFM chip, the “plug”, is flipped onto the base chip and pressed from the backside by a spring. Electrical contact with the eventual stress sensors, capacitive or piezoelectric sensor/actuators, is provided by contact bumps. These bumps of about 8 μm height are placed onto the base chip. They touch the pads on the AFM chip that were originally foreseen to be for wire bonding and thus provide the electrical contact. This connector schema was successfully used to register AFM images with piezoresistive cantilevers.

High bandwidth piezoresistive force probes with integrated thermal actuation

PubMed Central

Doll, Joseph C.; Pruitt, Beth L.

2012-01-01

We present high-speed force probes with on-chip actuation and sensing for the measurement of pN-scale forces at the microsecond time scale. We achieve a high resonant frequency in water (1–100 kHz) with requisite low spring constants (0.3–40 pN/nm) and low integrated force noise (1–100 pN) by targeting probe dimensions on the order of 300 nm thick, 1–2 μm wide and 30–200 μm long. Forces are measured using silicon piezoresistors while the probes are actuated thermally with an aluminum unimorph and silicon heater. The piezoresistive sensors are designed using open source numerical optimization code that incorporates constraints on operating temperature. Parylene passivation enables operation in ionic media and we demonstrate simultaneous actuation and sensing. The improved design and fabrication techniques that we describe enable a 10–20 fold improvement in force resolution or measurement bandwidth over prior piezoresistive cantilevers of comparable thickness. PMID:23175616

Microwave Driven Actuators Power Allocation and Distribution

NASA Technical Reports Server (NTRS)

Forbes, Timothy; Song, Kyo D.

2000-01-01

Design, fabrication and test of a power allocation and distribution (PAD) network for microwave driven actuators is presented in this paper. Development of a circuit that would collect power from a rectenna array amplify and distribute the power to actuators was designed and fabricated for space application in an actuator array driven by a microwave. A P-SPICE model was constructed initially for data reduction purposes, and was followed by a working real-world model. A voltage up - converter (VUC) is used to amplify the voltage from the individual rectenna. The testing yielded a 26:1 voltage amplification ratio with input voltage at 9 volts and a measured output voltage 230VDC. Future work includes the miniaturization of the circuitry, the use of microwave remote control, and voltage amplification technology for each voltage source. The objective of this work is to develop a model system that will collect DC voltage from an array of rectenna and propagate the voltage to an array of actuators.

A paper-based cantilever array sensor: Monitoring volatile organic compounds with naked eye.

PubMed

Fraiwan, Arwa; Lee, Hankeun; Choi, Seokheun

2016-09-01

Volatile organic compound (VOC) detection is critical for controlling industrial and commercial emissions, environmental monitoring, and public health. Simple, portable, rapid and low-cost VOC sensing platforms offer the benefits of on-site and real-time monitoring anytime and anywhere. The best and most practically useful approaches to monitoring would include equipment-free and power-free detection by the naked eye. In this work, we created a novel, paper-based cantilever sensor array that allows simple and rapid naked-eye VOC detection without the need for power, electronics or readout interface/equipment. This simple VOC detection method was achieved using (i) low-cost paper materials as a substrate and (ii) swellable thin polymers adhered to the paper. Upon exposure to VOCs, the polymer swelling adhered to the paper-based cantilever, inducing mechanical deflection that generated a distinctive composite pattern of the deflection angles for a specific VOC. The angle is directly measured by the naked eye on a 3-D protractor printed on a paper facing the cantilevers. The generated angle patterns are subjected to statistical algorithms (linear discriminant analysis (LDA)) to classify each VOC sample and selectively detect a VOC. We classified four VOC samples with 100% accuracy using LDA. Copyright © 2016 Elsevier B.V. All rights reserved.

Soft mobile robots driven by foldable dielectric elastomer actuators

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sun, Wenjie; Liu, Fan; Ma, Ziqi

A cantilever beam with elastic hinge pulled antagonistically by two dielectric elastomer (DE) membranes in tension forms a foldable actuator if one DE membrane is subject to a voltage and releases part of tension. Simply placing parallel rigid bars on the prestressed DE membranes results in enhanced actuators working in a pure shear state. We report design, analysis, fabrication, and experiment of soft mobile robots that are moved by such foldable DE actuators. We describe systematic measurement of the foldable actuators and perform theoretical analysis of such actuators based on minimization of total energy, and a good agreement is achievedmore » between model prediction and measurement. We develop two versions of prototypes of soft mobile robots driven either by two sets of DE membranes or one DE membrane and elastic springs. We demonstrate locomotion of these soft mobile robots and highlight several key design parameters that influence locomotion of the robots. A 45 g soft robot driven by a cyclic triangle voltage with amplitude 7.4 kV demonstrates maximal stroke 160 mm or maximal rolling velocity 42 mm/s. The underlying mechanics and physics of foldable DE actuators can be leveraged to develop other soft machines for various applications.« less

Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT Unimorph Actuators

NASA Technical Reports Server (NTRS)

Hishinumat, Yoshikazu; Yang, Eui - Hyeok (EH)

2005-01-01

We have demonstrated a large aperture (50 mm x 50 mm) continuous membrane deformable mirror (DM) with a large-stroke piezoelectric unimorph actuator array. The DM consists of a continuous, large aperture, silicon membrane 'transferred' in its entirety onto a 20 x 20 piezoelectric unimorph actuator array. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5.7 [m at 20V. An assembled DM showed an operating frequency bandwidth of 30 kHz and influence function of approximately 30%.

Correcting Thermal Deformations in an Active Composite Reflector

NASA Technical Reports Server (NTRS)

Bradford, Samuel C.; Agnes, Gregory S.; Wilkie, William K.

2011-01-01

Large, high-precision composite reflectors for future space missions are costly to manufacture, and heavy. An active composite reflector capable of adjusting shape in situ to maintain required tolerances can be lighter and cheaper to manufacture. An active composite reflector testbed was developed that uses an array of piezoelectric composite actuators embedded in the back face sheet of a 0.8-m reflector panel. Each individually addressable actuator can be commanded from 500 to +1,500 V, and the flatness of the panel can be controlled to tolerances of 100 nm. Measuring the surface flatness at this resolution required the use of a speckle holography interferometer system in the Precision Environmental Test Enclosure (PETE) at JPL. The existing testbed combines the PETE for test environment stability, the speckle holography system for measuring out-of-plane deformations, the active panel including an array of individually addressable actuators, a FLIR thermal camera to measure thermal profiles across the reflector, and a heat source. Use of an array of flat piezoelectric actuators to correct thermal deformations is a promising new application for these actuators, as is the use of this actuator technology for surface flatness and wavefront control. An isogrid of these actuators is moving one step closer to a fully active face sheet, with the significant advantage of ease in manufacturing. No extensive rib structure or other actuation backing structure is required, as these actuators can be applied directly to an easy-to-manufacture flat surface. Any mission with a surface flatness requirement for a panel or reflector structure could adopt this actuator array concept to create lighter structures and enable improved performance on orbit. The thermal environment on orbit tends to include variations in temperature during shadowing or changes in angle. Because of this, a purely passive system is not an effective way to maintain flatness at the scale of microns over several meters. This technology is specifically referring to correcting thermal deformations of a large, flat structure to a specified tolerance. However, the underlying concept (an array of actuators on the back face of a panel for correcting the flatness of the front face) could be extended to many applications, including energy harvesting, changing the wavefront of an optical system, and correcting the flatness of an array of segmented deployable panels.

A nonlinear theory for fibre-reinforced magneto-elastic rods

NASA Astrophysics Data System (ADS)

Ciambella, Jacopo; Favata, Antonino; Tomassetti, Giuseppe

2018-01-01

We derive a model for the finite motion of a fibre-reinforced magneto-elastic rod. The reinforcing particles are assumed weakly and uniformly magnetized, rigid and firmly embedded into the elastomeric matrix. We deduce closed-form expressions of the quasi-static motion of the rod in terms of the external magnetic field and of the body forces. The dependences of the motion on the shape of the inclusions, their orientation, their anisotropic magnetic properties and the Young modulus of the matrix are analysed and discussed. Two case studies are presented, in which the rod is used as an actuator suspended in a cantilever configuration. This work can foster new applications in the field of soft-actuators.

Detection of Non-Symmetrical Damage in Smart Plate-Like Structures

NASA Technical Reports Server (NTRS)

Blanks, H. T.; Emeric, P. R.

1998-01-01

A two-dimensional model for in-plane vibrations of a cantilever plate with a non-symmetrical damage is used in the context of defect identification in materials with piezoelectric ceramic patches bonded to their surface. These patches can act both as actuators and sensors in a self-analyzing fashion, which is a characteristic of smart materials. A Galerkin method is used to approximate the dynamic response of these structures. The natural frequency shifts due to the damage are estimated numerically and compared to experimental data obtained from tests on cantilever aluminum plate-like structures damaged at different locations with defects of different depths. The damage location and extent are determined by an enhanced least square identification method. Efficacy of the frequency shift based algorithms is demonstrated using experimental data.

Probing Mechanics of Crumpled Two-Dimensional Membranes and Cantilevers

NASA Astrophysics Data System (ADS)

Nicholl, Ryan; Conley, Hiram; Lavrik, Nickolay; Vlassiouk, Ivan; Puzyrev, Yevgeniy; Sreenivas, Vijayashree Parsi; Pantelides, Sokrates; Bolotin, Kirill

Two-dimensional materials (2DMs) are inevitably crumpled in the out-of-plane direction due to both static wrinkling associated with uneven stresses and dynamic wrinkling resulting from flexural phonons. Here, we investigate the effect of this crumpling on mechanical properties of 2DMs - in-plane stiffness and bending rigidity. To carry out these measurements, we developed techniques to fabricate graphene membranes and singly clamped graphene cantilevers that are stable in vacuum and air. The measurements are performed by actuating these devices electrostatically and monitoring their displacement via sensitive interferometric profilometry both at room and low temperatures. We find that crumpling lowers the in-plane stiffness and strongly increases the bending rigidity of 2DMs. Furthermore, we unravel the relative contribution of static and dynamic wrinkling to observed renormalization of the effective mechanical constants.

Blood monitoring systems and methods thereof

NASA Technical Reports Server (NTRS)

Zander, Dennis (Inventor); Mir, Jose (Inventor)

2012-01-01

A blood monitoring system is capable of monitoring the blood of a subject in vivo. The blood monitoring system comprises: 1) an array of movable microneedle micromachined within associated wells; 2) array of motion actuators able to move each needle in and out of their associated wells; 3) array of microvalves associated with each microneedle able to control the flow of air around the microneedle; 4) an array of chemical sensors inserted into patient by movable microneedles; 5) an array of inductors able to measure chemical concentration in the vicinity of inserted chemical sensors; 6) conducting vias that provide timed actuating signal signals from a control system to each motion actuator; 7) conducting vias that transmit signal produced by array of chemical sensors to the control system for processing, although the blood monitoring system can comprise other numbers and types of elements in other configurations.

The analysis of tensegrity structures for the design of a morphing wing

NASA Astrophysics Data System (ADS)

Moored, Keith W., III; Bart-Smith, Hilary

2005-05-01

Tensegrity structures have become of engineering interest in recent years, but very few have found practical use. This lack of integration is attributed to the lack of a well formulated design procedure. In this paper, a preliminary procedure is presented for developing morphing tensegrity structures that include actuating elements. To do this, the virtual work method has been modified to allow for individual actuation of struts and cables. A generalized connectivity matrix for a cantilever beam constructed from either a single 4-strut cell or multiple 4-strut cells has been developed. Global deflections resulting from actuation of specific elements have been calculated. Furthermore, the force density method is expanded to include a necessary upper bound condition such that a physically feasible structure can be designed. Finally, the importance of relative force density values on the overall shape of a structure comprising of multiple unit cells is discussed.

Electrostatically operated optical microshutter array for a miniature integrated optical spectrometer

NASA Astrophysics Data System (ADS)

Ilias, Samir; Picard, Francis; Larouche, Carl; Kruzelecky, Roman; Jamroz, Wes

2017-11-01

16x1 programmable microshutter arrays allowing control of the light transmitted through a transparent substrate supporting the array were successfully fabricated using surface micromachining technology. Each microshutter is basically an electrostatic zipping actuator having a curved shape induced by a stress gradient through the actuator thickness. When a sufficient voltage is applied between the microshutter and the actuation electrode surrounding the associated microslit area, the generated electrostatic force pulls the actuator down to the substrate which closes the microslit. Opening the slit relies on the restoring force. High light transmission through the slit area is obtained with the actuator in the open position and excellent light blocking is observed when the shutter is closed. Static and dynamic responses of the device were determined. The pull-in voltage to close the microslit was about 110 V and the response times to close and open the microslit were about 2 ms and 7 ms, respectively.

Numerical Studies of an Array of Fluidic Diverter Actuators for Flow Control

NASA Technical Reports Server (NTRS)

Gokoglu, Suleyman A.; Kuczmarski, Maria A.; Culley, Dennis E.; Raghu, Surya

2011-01-01

In this paper, we study the effect of boundary conditions on the behavior of an array of uniformly-spaced fluidic diverters with an ultimate goal to passively control their output phase. This understanding will aid in the development of advanced designs of actuators for flow control applications in turbomachinery. Computations show that a potential design is capable of generating synchronous outputs for various inlet boundary conditions if the flow inside the array is initiated from quiescence. However, when the array operation is originally asynchronous, several approaches investigated numerically demonstrate that re-synchronization of the actuators in the array is not practical since it is very sensitive to asymmetric perturbations and imperfections. Experimental verification of the insights obtained from the present study is currently being pursued.

Coherent Optomechanical Switch for Motion Transduction Based on Dynamically Localized Mechanical Modes

NASA Astrophysics Data System (ADS)

Fu, Hao; Gong, Zhi-cheng; Yang, Li-ping; Mao, Tian-hua; Sun, Chang-pu; Yi, Su; Li, Yong; Cao, Geng-yu

2018-05-01

We present a coherent switch for motion transduction based on dynamically localized mechanical modes in an optomechanical system consisting of two coupled cantilevers. By placing one of the cantilevers inside a harmonically oscillating optical trap, the effective coupling strength between the degenerate cantilevers can be tuned experimentally. In particular, when the coupling is turned off, we show that mechanical motion becomes tightly bounded to the isolated cantilevers rather than propagating away as a result of destructive Landau-Zener-Stückelberg-like interference. The effect of dynamical localization is adopted to implement a coherent switch, through which the tunneling oscillation is turned on and off with well-preserved phase coherence. We provide a simple yet efficient approach for full control of the coupling between mechanical resonators, which is highly desirable for coherent control of transport phenomena in a coupled-mechanical-resonator array.

Optimizing an Actuator Array for the Control of Multi-Frequency Noise in Aircraft Interiors

NASA Technical Reports Server (NTRS)

Palumbo, D. L.; Padula, S. L.

1997-01-01

Techniques developed for selecting an optimized actuator array for interior noise reduction at a single frequency are extended to the multi-frequency case. Transfer functions for 64 actuators were obtained at 5 frequencies from ground testing the rear section of a fully trimmed DC-9 fuselage. A single loudspeaker facing the left side of the aircraft was the primary source. A combinatorial search procedure (tabu search) was employed to find optimum actuator subsets of from 2 to 16 actuators. Noise reduction predictions derived from the transfer functions were used as a basis for evaluating actuator subsets during optimization. Results indicate that it is necessary to constrain actuator forces during optimization. Unconstrained optimizations selected actuators which require unrealistically large forces. Two methods of constraint are evaluated. It is shown that a fast, but approximate, method yields results equivalent to an accurate, but computationally expensive, method.

Flexible Structural-Health-Monitoring Sheets

NASA Technical Reports Server (NTRS)

Qing, Xinlin; Kuo, Fuo

2008-01-01

A generic design for a type of flexible structural-health-monitoring sheet with multiple sensor/actuator types and a method of manufacturing such sheets has been developed. A sheet of this type contains an array of sensing and/or actuation elements, associated wires, and any other associated circuit elements incorporated into various flexible layers on a thin, flexible substrate. The sheet can be affixed to a structure so that the array of sensing and/or actuation elements can be used to analyze the structure in accordance with structural-health-monitoring techniques. Alternatively, the sheet can be designed to be incorporated into the body of the structure, especially if the structure is made of a composite material. Customarily, structural-health monitoring is accomplished by use of sensors and actuators arrayed at various locations on a structure. In contrast, a sheet of the present type can contain an entire sensor/actuator array, making it unnecessary to install each sensor and actuator individually on or in a structure. Sensors of different types such as piezoelectric and fiber-optic can be embedded in the sheet to form a hybrid sensor network. Similarly, the traces for electric communication can be deposited on one or two layers as required, and an entirely separate layer can be employed to shield the sensor elements and traces.

Design Optimization Tool for Synthetic Jet Actuators Using Lumped Element Modeling

NASA Technical Reports Server (NTRS)

Gallas, Quentin; Sheplak, Mark; Cattafesta, Louis N., III; Gorton, Susan A. (Technical Monitor)

2005-01-01

The performance specifications of any actuator are quantified in terms of an exhaustive list of parameters such as bandwidth, output control authority, etc. Flow-control applications benefit from a known actuator frequency response function that relates the input voltage to the output property of interest (e.g., maximum velocity, volumetric flow rate, momentum flux, etc.). Clearly, the required performance metrics are application specific, and methods are needed to achieve the optimal design of these devices. Design and optimization studies have been conducted for piezoelectric cantilever-type flow control actuators, but the modeling issues are simpler compared to synthetic jets. Here, lumped element modeling (LEM) is combined with equivalent circuit representations to estimate the nonlinear dynamic response of a synthetic jet as a function of device dimensions, material properties, and external flow conditions. These models provide reasonable agreement between predicted and measured frequency response functions and thus are suitable for use as design tools. In this work, we have developed a Matlab-based design optimization tool for piezoelectric synthetic jet actuators based on the lumped element models mentioned above. Significant improvements were achieved by optimizing the piezoceramic diaphragm dimensions. Synthetic-jet actuators were fabricated and benchtop tested to fully document their behavior and validate a companion optimization effort. It is hoped that the tool developed from this investigation will assist in the design and deployment of these actuators.

A microelectromechanical system artificial basilar membrane based on a piezoelectric cantilever array and its characterization using an animal model.

PubMed

Jang, Jongmoon; Lee, JangWoo; Woo, Seongyong; Sly, David J; Campbell, Luke J; Cho, Jin-Ho; O'Leary, Stephen J; Park, Min-Hyun; Han, Sungmin; Choi, Ji-Wong; Jang, Jeong Hun; Choi, Hongsoo

2015-07-31

We proposed a piezoelectric artificial basilar membrane (ABM) composed of a microelectromechanical system cantilever array. The ABM mimics the tonotopy of the cochlea: frequency selectivity and mechanoelectric transduction. The fabricated ABM exhibits a clear tonotopy in an audible frequency range (2.92-12.6 kHz). Also, an animal model was used to verify the characteristics of the ABM as a front end for potential cochlear implant applications. For this, a signal processor was used to convert the piezoelectric output from the ABM to an electrical stimulus for auditory neurons. The electrical stimulus for auditory neurons was delivered through an implanted intra-cochlear electrode array. The amplitude of the electrical stimulus was modulated in the range of 0.15 to 3.5 V with incoming sound pressure levels (SPL) of 70.1 to 94.8 dB SPL. The electrical stimulus was used to elicit an electrically evoked auditory brainstem response (EABR) from deafened guinea pigs. EABRs were successfully measured and their magnitude increased upon application of acoustic stimuli from 75 to 95 dB SPL. The frequency selectivity of the ABM was estimated by measuring the magnitude of EABRs while applying sound pressure at the resonance and off-resonance frequencies of the corresponding cantilever of the selected channel. In this study, we demonstrated a novel piezoelectric ABM and verified its characteristics by measuring EABRs.

Structural control by the use of piezoelectric active members

NASA Technical Reports Server (NTRS)

Fanson, J. L.; Chen, J.-C.

1987-01-01

Large Space Structures (LSS) exhibit characteristics which make the LSS control problem different form other control problems. LSS will most likely exhibit low frequency, densely spaced and lightly damped modes. In theory, the number of these modes is infinite. Because these structures are flexible, Vibration Suppression (VS) is an important aspect of LSS operation. In terms of VS, the control actuators should be as low mass as possible, have infinite bandwidth, and be electrically powered. It is proposed that actuators be built into the structure as dual purpose structural elements. A piezoelectric active member is proposed for the control of LSS. Such a device would consist of a piezoelectric actuator and sensor for measuring strain, and screwjack actuator in series for use in quasi-static shape control. An experiment simulates an active member using piezoelectric ceramic thin sheet material on a thin, uniform cantilever beam. The feasibility of using the piezoelectric materials for VS on LSS was demonstrated. Positive positive feedback as a VS control strategy was implemented. Multi-mode VS was achieved with dramatic reduction in dynamic response.

Topology optimization of embedded piezoelectric actuators considering control spillover effects

NASA Astrophysics Data System (ADS)

Gonçalves, Juliano F.; De Leon, Daniel M.; Perondi, Eduardo A.

2017-02-01

This article addresses the problem of active structural vibration control by means of embedded piezoelectric actuators. The topology optimization method using the solid isotropic material with penalization (SIMP) approach is employed in this work to find the optimum design of actuators taken into account the control spillover effects. A coupled finite element model of the structure is derived assuming a two-phase material and this structural model is written into the state-space representation. The proposed optimization formulation aims to determine the distribution of piezoelectric material which maximizes the controllability for a given vibration mode. The undesirable effects of the feedback control on the residual modes are limited by including a spillover constraint term containing the residual controllability Gramian eigenvalues. The optimization of the shape and placement of the conventionally embedded piezoelectric actuators are performed using a Sequential Linear Programming (SLP) algorithm. Numerical examples are presented considering the control of the bending vibration modes for a cantilever and a fixed beam. A Linear-Quadratic Regulator (LQR) is synthesized for each case of controlled structure in order to compare the influence of the additional constraint.

Deployment Methods for an Origami-Inspired Rigid-Foldable Array

NASA Technical Reports Server (NTRS)

Zirbel, Shannon A.; Trease, Brian P.; Magleby, Spencer P.; Howell, Larry L.

2014-01-01

The purpose of this work is to evaluate several deployment methods for an origami-inspired solar array at two size scales: 25-meter array and CubeSat array. The array enables rigid panel deployment and introduces new concepts for actuating CubeSat deployables. The design for the array was inspired by the origami flasher model (Lang, 1997; Shafer, 2001). Figure 1 shows the array prototyped from Garolite and Kapton film at the CubeSat scale. Prior work demonstrated that rigid panels like solar cells could successfully be folded into the final stowed configuration without requiring the panels to flex (Zirbel, Lang, Thomson, & al., 2013). The design of the array is novel and enables efficient use of space. The array can be wrapped around the central bus of the spacecraft in the case of the large array, or can accommodate storage of a small instrument payload in the case of the CubeSat array. The radial symmetry of this array around the spacecraft is ideally suited for spacecraft that need to spin. This work focuses on several actuation methods for a one-time deployment of the array. The array is launched in its stowed configuration and it will be deployed when it is in space. Concepts for both passive and active actuation were considered.

Electrostatically Driven Large Aperture Micro-Mirror Actuator Assemblies for High Fill-Factor, Agile Optical Phase Arrays

DTIC Science & Technology

2015-06-18

platform assembly 2, with micro-mirror platform deflection, measured on actuation side ( PFa ) and side opposite actuation (PFo...beam micro-mirror platform assembly 1; micro-mirror platform deflection, measured on actuation side ( PFa ) and side opposite actuation (PFo...side ( PFa ) and side opposite actuation (PFo) ........................................................ 106 xiv Figure 73: Graph of measured 10-beam

Compound semiconductor optical waveguide switch

DOEpatents

Spahn, Olga B.; Sullivan, Charles T.; Garcia, Ernest J.

2003-06-10

An optical waveguide switch is disclosed which is formed from III-V compound semiconductors and which has a moveable optical waveguide with a cantilevered portion that can be bent laterally by an integral electrostatic actuator to route an optical signal (i.e. light) between the moveable optical waveguide and one of a plurality of fixed optical waveguides. A plurality of optical waveguide switches can be formed on a common substrate and interconnected to form an optical switching network.

Piezo-thermal Probe Array for High Throughput Applications

PubMed Central

Gaitas, Angelo; French, Paddy

2012-01-01

Microcantilevers are used in a number of applications including atomic-force microscopy (AFM). In this work, deflection-sensing elements along with heating elements are integrated onto micromachined cantilever arrays to increase sensitivity, and reduce complexity and cost. An array of probes with 5–10 nm gold ultrathin film sensors on silicon substrates for high throughput scanning probe microscopy is developed. The deflection sensitivity is 0.2 ppm/nm. Plots of the change in resistance of the sensing element with displacement are used to calibrate the probes and determine probe contact with the substrate. Topographical scans demonstrate high throughput and nanometer resolution. The heating elements are calibrated and the thermal coefficient of resistance (TCR) is 655 ppm/K. The melting temperature of a material is measured by locally heating the material with the heating element of the cantilever while monitoring the bending with the deflection sensing element. The melting point value measured with this method is in close agreement with the reported value in literature. PMID:23641125

Nano-mechanical Resonantor Sensors for Virus Detection

NASA Astrophysics Data System (ADS)

Bashir, Rashid

2005-03-01

Micro and nanoscale cantilever beams can be used as highly sensitive mass detectors. Scaling down the area of the cantilever allows a decrease in minimum detectable mass limit while scaling down the thickness allows the resonant frequencies to be within measurable range. We have fabricated arrays of silicon cantilever beams as nanomechanical resonant sensors to detect the mass of individual virus particles. The dimensions of the fabricated cantilever beams were in the range of 4-5 μm in length, 1-2 μm in width and 20-30 nm in thickness. The virus particles we used in the study were vaccinia virus, which is a member of the Poxviridae family and forms the basis of the smallpox vaccine. The frequency spectra of the cantilever beams, due to thermal and ambient noise, were measured using a laser Doppler vibrometer under ambient conditions. The change in resonant frequency as a function of the virus particle mass binding on the cantilever beam surface forms the basis of the detection scheme. We have demonstrated the detection of a single vaccinia virus particle with an average mass of 9.5 fg. Specific capture of the antigens requires attachment of antibodies, which can be in the same range of thickness as these cantilever sensors, and can alter their mechanical properties. We have attached protein layers on both sides of 30nm thick cantilever beams and we show that the resonant frequencies can increase or decrease upon the attachment of protein layers to the cantilevers. In certain cases, the increase in spring constant out-weighs the increase in mass and the resonant frequencies can increase upon the attachment of the protein layers. These devices can be very useful as components of biosensors for the detection of air-borne virus particles.

NASA Tech Briefs, May 2003

NASA Technical Reports Server (NTRS)

2003-01-01

Topics covered include: Using Diffusion Bonding in Making Piezoelectric Actuators; Wireless Temperature-Monitoring System; Analog Binaural Circuits for Detecting and Locating Leaks; Mirrors Containing Biomimetic Shape-Control Actuators; Surface-Micromachined Planar Arrays of Thermopiles; Cascade Back-Propagation Learning in Neural Networks; Perovskite Superlattices as Tunable Microwave Devices; Rollable Thin-Shell Nanolaminate Mirrors; Flight Tests of a Ministick Controller in an F/A-18 Airplane; Piezoelectrically Actuated Shutter for High Vacuum; Bio-Inspired Engineering of Exploration Systems; Microscope Cells Containing Multiple Micromachined Wells; Electrophoretic Deposition for Fabricating Microbatteries; Integrated Arrays of Ion-Sensitive Electrodes; Model of Fluidized Bed Containing Reacting Solids and Gases; Membrane Mirrors With Bimorph Shape Actuators; Using Fractional Clock-Period Delays in Telemetry Arraying; Developing Generic Software for Spacecraft Avionics; Numerical Study of Pyrolysis of Biomass in Fluidized Beds; and Assessment of Models of Chemically Reacting Granular Flows.

Pneumatically-actuated artificial cilia array for biomimetic fluid propulsion.

PubMed

Gorissen, Benjamin; de Volder, Michaël; Reynaerts, Dominiek

2015-11-21

Arrays of beating cilia emerged in nature as one of the most efficient propulsion mechanisms at a small scale, and are omnipresent in microorganisms. Previous attempts at mimicking these systems have foundered against the complexity of fabricating small-scale cilia exhibiting complex beating motions. In this paper, we propose for the first time arrays of pneumatically-actuated artificial cilia that are able to address some of these issues. These artificial cilia arrays consist of six highly flexible silicone rubber actuators with a diameter of 1 mm and a length of 8 mm that can be actuated independently from each other. In an experimental setup, the effects of the driving frequency, phase difference and duty cycle on the net flow in a closed-loop channel have been studied. Net fluid speeds of up to 19 mm s(-1) have been measured. Further, it is possible to invert the flow direction by simply changing the driving frequency or by changing the duty cycle of the driving block pulse pressure wave without changing the bending direction of the cilia. Using PIV measurements, we corroborate for the first time existing mathematical models of cilia arrays to measurements on prototypes.

Microwave-Driven Multifunctional Capability of Membrane Structures

NASA Technical Reports Server (NTRS)

Choi, Sang H.; Chu, Sang-Hyong; Song, Kyo D.; King, Glen C.

2002-01-01

A large, ultra lightweight space structure, such as solar sails and Gossamer spacecrafts, requires a distributed power source to alleviate wire networks, unlike the localized on-board power infrastructures typically found in most small spacecrafts. The concept of microwave-driven multifunctional capability for membrane structures is envisioned as the best option to alleviate the complexity associated with hard-wired control circuitry and on-board power infrastructures. A rectenna array based on a patch configuration for high voltage output was developed to drive membrane actuators, sensors, probes, or other devices. Networked patch rectenna array receives and converts microwave power into a DC power for an array of smart actuators. To use microwave power effectively, the concept of a power allocation and distribution (PAD) circuit is adopted for networking a rectenna/actuator patch array. The use of patch rectennas adds a significant amount of rigidity to membrane flexibility and they are relatively heavy. A dipole rectenna array (DRA) appears to be ideal for thin-film membrane structures, since DRA is flexible and light. Preliminary design and fabrication of PAD circuitry that consists of a few nodal elements were made for laboratory testing. The networked actuators were tested to correlate the network coupling effect, power allocation and distribution, and response time.

Addressable microshutter array for a high-performance infrared miniature dispersive spectrometer

NASA Astrophysics Data System (ADS)

Ilias, S.; Picard, F.; Larouche, C.; Kruzelecky, R.; Jamroz, W.

2009-02-01

Programmable microshutter arrays were designed to improve the attainable signal to noise ratio (SNR) of a miniature dispersive spectrometer developed for space applications. Integration of a microshutter array to this instrument provides advantages such as the addition of a binary coded optical input operation mode for the miniature spectrometer which results in SNR benefits without spectral resolution loss. These arrays were successfully fabricated using surface micromachining technology. Each microshutter is basically an electrostatic zipping actuator having a curved shape. Applying critical voltage to one microshutter pulls the actuator down to the substrate and closes the associated slit. Opening of the microslits relies on the restoring force generated within the actuated zippers. High light transmission is obtained with the actuator in the open position and excellent light blocking is observed when the shutter is closed. The pull-in voltage to close the microslits was about 110 V and the response times to close and open the microslits were about 2 ms and 7 ms, respectively. Selected array dies were mounted in modified off-the-shelf ceramic packages and electrically connected to package pins. The packages were hermetically sealed with AR coated sapphire windows. This last packaging step was performed in a dry nitrogen controlled atmosphere.

Wireless implantable chip with integrated nitinol-based pump for radio-controlled local drug delivery.

PubMed

Fong, Jeffrey; Xiao, Zhiming; Takahata, Kenichi

2015-02-21

We demonstrate an active, implantable drug delivery device embedded with a microfluidic pump that is driven by a radio-controlled actuator for temporal drug delivery. The polyimide-packaged 10 × 10 × 2 mm(3) chip contains a micromachined pump chamber and check valves of Parylene C to force the release of the drug from a 76 μL reservoir by wirelessly activating the actuator using external radio-frequency (RF) electromagnetic fields. The rectangular-shaped spiral-coil actuator based on nitinol, a biocompatible shape-memory alloy, is developed to perform cantilever-like actuation for pumping operation. The nitinol-coil actuator itself forms a passive 185 MHz resonant circuit that serves as a self-heat source activated via RF power transfer to enable frequency-selective actuation and pumping. Experimental wireless operation of fabricated prototypes shows successful release of test agents from the devices placed in liquid and excited by radiating tuned RF fields with an output power of 1.1 W. These tests reveal a single release volume of 219 nL, suggesting a device's capacity of ~350 individual ejections of drug from its reservoir. The thermal behavior of the activated device is also reported in detail. This proof-of-concept prototype validates the effectiveness of wireless RF pumping for fully controlled, long-lasting drug delivery, a key step towards enabling patient-tailored, targeted local drug delivery through highly miniaturized implants.

Single virus particle mass detection using microresonators with nanoscale thickness

NASA Astrophysics Data System (ADS)

Gupta, A.; Akin, D.; Bashir, R.

2004-03-01

In this letter, we present the microfabrication and application of arrays of silicon cantilever beams as microresonator sensors with nanoscale thickness to detect the mass of individual virus particles. The dimensions of the fabricated cantilever beams were in the range of 4-5 μm in length, 1-2 μm in width and 20-30 nm in thickness. The virus particles we used in the study were vaccinia virus, which is a member of the Poxviridae family and forms the basis of the smallpox vaccine. The frequency spectra of the cantilever beams, due to thermal and ambient noise, were measured using a laser Doppler vibrometer under ambient conditions. The change in resonant frequency as a function of the virus particle mass binding on the cantilever beam surface forms the basis of the detection scheme. We have demonstrated the detection of a single vaccinia virus particle with an average mass of 9.5 fg. These devices can be very useful as components of biosensors for the detection of airborne virus particles.

Microstructure actuation and gas sensing by the Knudsen thermal force

DOE Office of Scientific and Technical Information (OSTI.GOV)

Strongrich, Andrew; Alexeenko, Alina, E-mail: alexeenk@purdue.edu

2015-11-09

The generation of forces and moments on structures immersed in rarefied non-isothermal gas flows has received limited practical implementation since first being discovered over a century ago. The formation of significant thermal stresses requires both large thermal gradients and characteristic dimensions which are comparable to the gas molecular mean free path. For macroscopic geometries, this necessitates impractically high temperatures and very low pressures. At the microscale, however, these conditions are easily achieved, allowing the effects to be exploited, namely, for gas-property sensing and microstructure actuation. In this letter, we introduce and experimentally evaluate performance of a microelectromechanical in-plane Knudsen radiometricmore » actuator, a self-contained device having Knudsen thermal force generation, sensing, and tuning mechanisms integrated onto the same platform. Sensitivity to ambient pressure, temperature gradient, as well as gas composition is demonstrated. Results are presented in terms of a non-dimensional force coefficient, allowing measurements to be directly compared to the previous experimental and computational data on out-of-plane cantilevered configurations.« less

Stress measurements of planar dielectric elastomer actuators

DOE Office of Scientific and Technical Information (OSTI.GOV)

Osmani, Bekim; Aeby, Elise A.; Müller, Bert

Dielectric elastomer actuator (DEA) micro- and nano-structures are referred to artificial muscles because of their specific continuous power and adequate time response. The bending measurement of an asymmetric, planar DEA is described. The asymmetric cantilevers consist of 1 or 5 μm-thin DEAs deposited on polyethylene naphthalate (PEN) substrates 16, 25, 38, or 50 μm thick. The application of a voltage to the DEA electrodes generates an electrostatic pressure in the sandwiched silicone elastomer layer, which causes the underlying PEN substrate to bend. Optical beam deflection enables the detection of the bending angle vs. applied voltage. Bending radii as large asmore » 850 m were reproducibly detected. DEA tests with electric fields of up to 80 V/μm showed limitations in electrode’s conductivity and structure failures. The actuation measurement is essential for the quantitative characterization of nanometer-thin, low-voltage, single- and multi-layer DEAs, as foreseen for artificial sphincters to efficiently treat severe urinary and fecal incontinence.« less

Facile hyphenation of gas chromatography and a microcantilever array sensor for enhanced selectivity.

PubMed

Chapman, Peter J; Vogt, Frank; Dutta, Pampa; Datskos, Panos G; Devault, Gerald L; Sepaniak, Michael J

2007-01-01

The very simple coupling of a standard, packed-column gas chromatograph with a microcantilever array (MCA) is demonstrated for enhanced selectivity and potential analyte identification in the analysis of volatile organic compounds (VOCs). The cantilevers in MCAs are differentially coated on one side with responsive phases (RPs) and produce bending responses of the cantilevers due to analyte-induced surface stresses. Generally, individual components are difficult to elucidate when introduced to MCA systems as mixtures, although pattern recognition techniques are helpful in identifying single components, binary mixtures, or composite responses of distinct mixtures (e.g., fragrances). In the present work, simple test VOC mixtures composed of acetone, ethanol, and trichloroethylene (TCE) in pentane and methanol and acetonitrile in pentane are first separated using a standard gas chromatograph and then introduced into a MCA flow cell. Significant amounts of response diversity to the analytes in the mixtures are demonstrated across the RP-coated cantilevers of the array. Principal component analysis is used to demonstrate that only three components of a four-component VOC mixture could be identified without mixture separation. Calibration studies are performed, demonstrating a good linear response over 2 orders of magnitude for each component in the primary study mixture. Studies of operational parameters including column temperature, column flow rate, and array cell temperature are conducted. Reproducibility studies of VOC peak areas and peak heights are also carried out showing RSDs of less than 4 and 3%, respectively, for intra-assay studies. Of practical significance is the facile manner by which the hyphenation of a mature separation technique and the burgeoning sensing approach is accomplished, and the potential to use pattern recognition techniques with MCAs as a new type of detector for chromatography with analyte-identifying capabilities.

Optical diffraction for measurements of nano-mechanical bending

NASA Astrophysics Data System (ADS)

Hermans, Rodolfo I.; Dueck, Benjamin; Ndieyira, Joseph Wafula; McKendry, Rachel A.; Aeppli, Gabriel

2016-06-01

We explore and exploit diffraction effects that have been previously neglected when modelling optical measurement techniques for the bending of micro-mechanical transducers such as cantilevers for atomic force microscopy. The illumination of a cantilever edge causes an asymmetric diffraction pattern at the photo-detector affecting the calibration of the measured signal in the popular optical beam deflection technique (OBDT). The conditions that avoid such detection artefacts conflict with the use of smaller cantilevers. Embracing diffraction patterns as data yields a potent detection technique that decouples tilt and curvature and simultaneously relaxes the requirements on the illumination alignment and detector position through a measurable which is invariant to translation and rotation. We show analytical results, numerical simulations and physiologically relevant experimental data demonstrating the utility of the diffraction patterns. We offer experimental design guidelines and quantify possible sources of systematic error in OBDT. We demonstrate a new nanometre resolution detection method that can replace OBDT, where diffraction effects from finite sized or patterned cantilevers are exploited. Such effects are readily generalized to cantilever arrays, and allow transmission detection of mechanical curvature, enabling instrumentation with simpler geometry. We highlight the comparative advantages over OBDT by detecting molecular activity of antibiotic Vancomycin.

A reconfigurable tactile display based on polymer MEMS technology

NASA Astrophysics Data System (ADS)

Wu, Xiaosong

A tactile display provides information such as shape, texture, temperature, and hardness to a user. Ultimately, a tactile display could be used to recreate a virtual object that may be stored in a computer. However, such advanced displays are not yet widely available, primarily due to the lack of low cost, large area, compact actuator arrays that can stimulate the large numbers of receptors of the user and that can also meet the high requirements for user safety and comfort. This research focuses on the development of polymer microfabrication technologies for the realization of two major components of a pneumatic tactile display: a microactuator array and a complementary microvalve (control) array. In this work, the concept, fabrication, and characterization of a kinematically-stabilized polymeric microbubble actuator ("endoskeletal microbubble actuator") is presented. A systematic design and modeling procedure was carried out to generate an optimized geometry of the corrugated diaphragm to satisfy membrane deflection, force, and stability requirements set forth by the tactile display goals. A mass-manufacturable actuator has been fabricated using the approaches of lithography and micromolding. A prototype of a single endoskeletal bubble actuator with a diameter of 2.6mm has been fabricated and characterized. In addition, in order to further reduce the size and cost of the tactile display, a microvalve array can be integrated into the tactile display system to control the pneumatic fluid that actuates the microbubble actuator. A piezoelectrically-driven and hydraulically-amplified polymer microvalve has been designed, fabricated, and tested. An incompressible elastomer was used as a solid hydraulic medium to convert the small axial displacement of a piezoelectric actuator into a large valve head stroke while maintaining a large blocking force. The function of the microvalve as an on-off switch for a pneumatic microbubble tactile actuator has been demonstrated. Compared to present technologies, the microvalve developed can achieve large flow rate control due to its amplification mechanism, can avoid complex sealing problem because solid rather than liquid medium is used, and can form a dense valve array due to the small lateral dimension of the actuator used. To further reduce the cost of the microvalve, a laterally-laminated multilayer PZT actuator has been fabricated using diced PZT multilayer, high aspect ratio SU-8 photolithography, and molding of electrically conductive polymer composite electrodes. This fabrication process is simple and straightforward compared to previous lateral lamination approaches. An 8-layer device has shown a displacement of 0.63 micron at 100V driving voltage, which agrees well with simulation results. The lateral lamination fabrication process provides a valuable alternative for making compact, low-voltage, multilayer piezoelectric micro-actuators as microvalve driving element. A refreshable Braille cell as a tactile display prototype has been developed based on a 2x3 endoskeletal microbubble array and an array of commercial valves. The prototype can provide both a static display (which meets the displacement and force requirement of a Braille display) and vibratory tactile sensations. Along with the above capabilities, the device was designed to meet the criteria of lightness and compactness to permit portable operation. The design is scalable with respect to the number of tactile actuators while still being simple to fabricate.

A microelectromechanical system artificial basilar membrane based on a piezoelectric cantilever array and its characterization using an animal model

PubMed Central

Jang, Jongmoon; Lee, JangWoo; Woo, Seongyong; Sly, David J.; Campbell, Luke J.; Cho, Jin-Ho; O’Leary, Stephen J.; Park, Min-Hyun; Han, Sungmin; Choi, Ji-Wong; Hun Jang, Jeong; Choi, Hongsoo

2015-01-01

We proposed a piezoelectric artificial basilar membrane (ABM) composed of a microelectromechanical system cantilever array. The ABM mimics the tonotopy of the cochlea: frequency selectivity and mechanoelectric transduction. The fabricated ABM exhibits a clear tonotopy in an audible frequency range (2.92–12.6 kHz). Also, an animal model was used to verify the characteristics of the ABM as a front end for potential cochlear implant applications. For this, a signal processor was used to convert the piezoelectric output from the ABM to an electrical stimulus for auditory neurons. The electrical stimulus for auditory neurons was delivered through an implanted intra-cochlear electrode array. The amplitude of the electrical stimulus was modulated in the range of 0.15 to 3.5 V with incoming sound pressure levels (SPL) of 70.1 to 94.8 dB SPL. The electrical stimulus was used to elicit an electrically evoked auditory brainstem response (EABR) from deafened guinea pigs. EABRs were successfully measured and their magnitude increased upon application of acoustic stimuli from 75 to 95 dB SPL. The frequency selectivity of the ABM was estimated by measuring the magnitude of EABRs while applying sound pressure at the resonance and off-resonance frequencies of the corresponding cantilever of the selected channel. In this study, we demonstrated a novel piezoelectric ABM and verified its characteristics by measuring EABRs. PMID:26227924

A microelectromechanical system artificial basilar membrane based on a piezoelectric cantilever array and its characterization using an animal model

NASA Astrophysics Data System (ADS)

Jang, Jongmoon; Lee, Jangwoo; Woo, Seongyong; Sly, David J.; Campbell, Luke J.; Cho, Jin-Ho; O'Leary, Stephen J.; Park, Min-Hyun; Han, Sungmin; Choi, Ji-Wong; Hun Jang, Jeong; Choi, Hongsoo

2015-07-01

We proposed a piezoelectric artificial basilar membrane (ABM) composed of a microelectromechanical system cantilever array. The ABM mimics the tonotopy of the cochlea: frequency selectivity and mechanoelectric transduction. The fabricated ABM exhibits a clear tonotopy in an audible frequency range (2.92-12.6 kHz). Also, an animal model was used to verify the characteristics of the ABM as a front end for potential cochlear implant applications. For this, a signal processor was used to convert the piezoelectric output from the ABM to an electrical stimulus for auditory neurons. The electrical stimulus for auditory neurons was delivered through an implanted intra-cochlear electrode array. The amplitude of the electrical stimulus was modulated in the range of 0.15 to 3.5 V with incoming sound pressure levels (SPL) of 70.1 to 94.8 dB SPL. The electrical stimulus was used to elicit an electrically evoked auditory brainstem response (EABR) from deafened guinea pigs. EABRs were successfully measured and their magnitude increased upon application of acoustic stimuli from 75 to 95 dB SPL. The frequency selectivity of the ABM was estimated by measuring the magnitude of EABRs while applying sound pressure at the resonance and off-resonance frequencies of the corresponding cantilever of the selected channel. In this study, we demonstrated a novel piezoelectric ABM and verified its characteristics by measuring EABRs.

Optimal Control of Shock Wave Turbulent Boundary Layer Interactions Using Micro-Array Actuation

NASA Technical Reports Server (NTRS)

Anderson, Bernhard H.; Tinapple, Jon; Surber, Lewis

2006-01-01

The intent of this study on micro-array flow control is to demonstrate the viability and economy of Response Surface Methodology (RSM) to determine optimal designs of micro-array actuation for controlling the shock wave turbulent boundary layer interactions within supersonic inlets and compare these concepts to conventional bleed performance. The term micro-array refers to micro-actuator arrays which have heights of 25 to 40 percent of the undisturbed supersonic boundary layer thickness. This study covers optimal control of shock wave turbulent boundary layer interactions using standard micro-vane, tapered micro-vane, and standard micro-ramp arrays at a free stream Mach number of 2.0. The effectiveness of the three micro-array devices was tested using a shock pressure rise induced by the 10 shock generator, which was sufficiently strong as to separate the turbulent supersonic boundary layer. The overall design purpose of the micro-arrays was to alter the properties of the supersonic boundary layer by introducing a cascade of counter-rotating micro-vortices in the near wall region. In this manner, the impact of the shock wave boundary layer (SWBL) interaction on the main flow field was minimized without boundary bleed.

Coupled mixed-field laminate theory and finite element for smart piezoelectric composite shell structures

NASA Technical Reports Server (NTRS)

Saravanos, Dimitris A.

1996-01-01

Mechanics for the analysis of laminated composite shells with piezoelectric actuators and sensors are presented. A new mixed-field laminate theory for piezoelectric shells is formulated in curvilinear coordinates which combines single-layer assumptions for the displacements and a layerwise representation for the electric potential. The resultant coupled governing equations for curvilinear piezoelectric laminates are described. Structural mechanics are subsequently developed and an 8-node finite-element is formulated for the static and dynamic analysis of adaptive composite structures of general laminations containing piezoelectric layers. Evaluations of the method and comparisons with reported results are presented for laminated piezoelectric-composite plates, a closed cylindrical shell with a continuous piezoceramic layer and a laminated composite semi-circular cantilever shell with discrete cylindrical piezoelectric actuators and/or sensors.

‘Living cantilever arrays’ for characterization of mass of single live cells in fluids†

PubMed Central

Park, Kidong; Jang, Jaesung; Irimia, Daniel; Sturgis, Jennifer; Lee, James; Robinson, J. Paul; Toner, Mehmet; Bashir, Rashid

2013-01-01

The size of a cell is a fundamental physiological property and is closely regulated by various environmental and genetic factors. Optical or confocal microscopy can be used to measure the dimensions of adherent cells, and Coulter counter or flow cytometry (forward scattering light intensity) can be used to estimate the volume of single cells in a flow. Although these methods could be used to obtain the mass of single live cells, no method suitable for directly measuring the mass of single adherent cells without detaching them from the surface is currently available. We report the design, fabrication, and testing of ‘living cantilever arrays’, an approach to measure the mass of single adherent live cells in fluid using silicon cantilever mass sensor. HeLa cells were injected into microfluidic channels with a linear array of functionalized silicon cantilevers and the cells were subsequently captured on the cantilevers with positive dielectrophoresis. The captured cells were then cultured on the cantilevers in a microfluidic environment and the resonant frequencies of the cantilevers were measured. The mass of a single HeLa cell was extracted from the resonance frequency shift of the cantilever and was found to be close to the mass value calculated from the cell density from the literature and the cell volume obtained from confocal microscopy. This approach can provide a new method for mass measurement of a single adherent cell in its physiological condition in a non-invasive manner, as well as optical observations of the same cell. We believe this technology would be very valuable for single cell time-course studies of adherent live cells. PMID:18584076

Dynamic stress compensation by smart actuation

NASA Astrophysics Data System (ADS)

Irschik, Hans; Gusenbauer, Markus; Pichler, Uwe

2004-07-01

The actuating physical mechanisms utilized in smart materials can be described by eigenstrains. E.g., the converse piezoelectric effect in a piezoelastic body may be understood as an actuating eigenstrain. In the last decades, piezoelectricity has been extensively applied for the sake of actuation and sensing of structural vibrations. An important field of research in this respect has been devoted to the goal of compensating force-induced vibrations by means of eigenstrains. Considering the state-of-the-art in structural control and smart materials, almost no research has been performed on the problem of compensating stresses in force-loaded engineering structures by eigenstrains. It is well-known that stresses can influence the characteristics and the age of structures in various unpleasant ways. The present contribution is concerned with corresponding concepts for stress compensation which may have a highly beneficial influence upon the lifetime and structural integrity of the structure under consideration. We discuss the possibilities offered by displacement compensation to reduce the stresses to their quasi-static parts. As a numerical example, we consider the step response of an irregularly shaped cantilevered elastic plate under the action of an assigned traction at its boundary.

Design and Fabrication of 1D and 2D Micro Scanners Actuated by Double Layered Lead Zirconate Titanate (PZT) Bimorph Beams

NASA Astrophysics Data System (ADS)

Tsaur, Jiunnjye; Zhang, Lulu; Maeda, Ryutaro; Matsumoto, Sohei; Khumpuang, Sommawan

2002-06-01

Micro scanners including 1D scanner beams and 2D scanning micromirrors are designed and fabricated. In order to yield large bending force, the sol-gel derived double layered lead zirconate titanate (PZT) structures are developed to be the actuator components. In our developed fabrication process, the use of thermal treatment and the addition of one platinium/titanium film played an important role to yield the well-crystallized perovskite phase and decrease the residual strss of total cantilever structures successfully. In the case of 1D scanner beams with the size of 750× 230 μm2, the optical scanning angle was 41.2 deg with respect to actuation with AC 5 V at 2706 Hz. Under the applied bias of 10 V, the bimorph beam bended upward and the deflection angle of 34.3 deg was measured. A 2D scanning micromirror supported by four suspended double layered PZT actuators was designed to rotate around two orthogonal axes by the operation at different resonant frequencies. While resonating with AC 7.5 V at 3750 Hz and 5350 Hz, the maximum scanning area of 24\\circ× 26\\circ was obtained.

Silicon micromachined pumps employing piezoelectric membrane actuation for microfluidic systems

NASA Astrophysics Data System (ADS)

Koch, Michael

Microsystems technology is a rapidly expanding area that comprises electronics, mechanics and optics. In this field, physical/chemical sensing, fluid handling and optical communication are emerging as potential markets. Microfluidic systems like an implantable insulin pump, a drug delivery system and a total chemical analysis system are currently being developed by academia and industry around the world. This project contributes to the area of microfluidics in that a novel thick-film-on-silicon membrane actuator has been developed to allow inexpensive mass production of micropumps. To date piezoelectric plates have been surface mounted onto a silicon membrane. This single chip fabrication method can now be replaced by screen printing thick piezoelectric layers onto 4 inch silicon substrates. Two different pump types have been developed. These are membrane pumps with either cantilever valves or diffuser/nozzle valves. Pump rates between 100 and 200 μl min-1 and backpressures up to 4 kPa have been achieved with these pumps. Along with the technology of micropumps, simulators have been developed. A novel coupled FEM-CFD solver was realised by a computer controlled coupling of two commercially available packages (ANSYS and CFX-Flow3D). The results of this simulator were in good agreement with measurements on micromachined cantilever valves. CFX- Flow3D was also used to successfully model the behaviour of the diffuser/nozzle valve. Finally, the pump has been simulated using a continuity equation. A behavioural dynamic extension of the cantilever valve was necessary to achieve better prediction of the pump rates for higher frequencies. As well, a common process has been developed for microfluidic devices like micromixers, particle counters and sorters as well as flow sensors. The micromixer has been tested already and achieves mixing for input pressures between 2 and 7 kPa. This agrees with simulations of the diffusive mixing with CFX-Flow3D. Together with the micropump, a combination of these devices allows future development of microfluidic systems for the medical and (bio)chemical market.

Electrostatically actuatable light modulating device

DOEpatents

Koehler, Dale R.

1991-01-01

The electrostatically actuatable light modulator utilizes an opaque substrate plate patterned with an array of aperture cells, the cells comprised of physically positionable dielectric shutters and electrostatic actuators. With incorporation of a light source and a viewing screen, a projection display system is effected. Inclusion of a color filter array aligned with the aperture cells accomplishes a color display. The system is realized in terms of a silicon based manufacturing technology allowing fabrication of a high resolution capability in a physically small device which with the utilization of included magnification optics allows both large and small projection displays.

Mechanical-plowing-based high-speed patterning on hard material via advanced-control and ultrasonic probe vibration.

PubMed

Wang, Zhihua; Tan, Jun; Zou, Qingze; Jiang, Wei

2013-11-01

In this paper, we present a high-speed direct pattern fabrication on hard materials (e.g., a tungsten-coated quartz substrate) via mechanical plowing. Compared to other probe-based nanolithography techniques based on chemical- and/or physical-reactions (e.g., the Dip-pen technique), mechanical plowing is meritorious for its low cost, ease of process control, and capability of working with a wide variety of materials beyond conductive and/or soft materials. However, direct patterning on hard material faces two daunting challenges. First, the patterning throughput is ultimately hindered by the "writing" (plowing) speed, which, in turn, is limited by the adverse effects that can be excited/induced during high-speed, and/or large-range plowing, including the vibrational dynamics of the actuation system (the piezoelectric actuator, the cantilever, and the mechanical fixture connecting the cantilever to the actuator), the dynamic cross-axis coupling between different axes of motion, and the hysteresis and the drift effects related to the piezoelectric actuators. Secondly, it is very challenging to directly pattern on ultra-hard materials via plowing. Even with a diamond probe, the line depth of the pattern via continuous plowing on ultra-hard materials such as tungsten, is still rather small (<0.5 nm), particularly when the "writing" speed becomes high. To overcome these two challenges, we propose to utilize a novel iterative learning control technique to achieve precision tracking of the desired pattern during high-speed, large-range plowing, and introduce ultrasonic vibration of the probe in the normal (vertical) direction during the plowing process to enable direct patterning on ultra hard materials. The proposed approach was implemented to directly fabricate patterns on a mask with tungsten coating and quartz substrate. The experimental results demonstrated that a large-size pattern of four grooves (20 μm in length with 300 nm spacing between lines) can be fabricated at a high speed of ~5 mm/s, with the line width and the line depth at ~95 nm and 2 nm, respectively. A fine pattern of the word "NANO" is also fabricated at the speed of ~5 mm/s.

Characterization of Sputtered Nickel-Titanium (NiTi) Stress and Thermally Actuated Cantilever Bimorphs Based on NiTi Shape Memory Alloy (SMA)

DTIC Science & Technology

2015-11-01

necessary anneal . Following this, a thin film of NiTi was blanket sputtered at 600 °C. This NiTi blanket layer was then wet -etch patterned using a...varying the sputter parameters during NiTi deposition, such as thickness, substrate temperature during deposition and anneal , and argon pressure during...6 Fig. 4 Surface texture comparison between NiTi sputtered at RT, then annealed at 600 °C, and NiTi

Thermo-Magneto-Electric Generator Arrays for Active Heat Recovery System

PubMed Central

Chun, Jinsung; Song, Hyun-Cheol; Kang, Min-Gyu; Kang, Han Byul; Kishore, Ravi Anant; Priya, Shashank

2017-01-01

Continued emphasis on development of thermal cooling systems is being placed that can cycle low grade heat. Examples include solar powered unmanned aerial vehicles (UAVs) and data storage servers. The power efficiency of solar module degrades at elevated temperature, thereby, necessitating the need for heat extraction system. Similarly, data centres in wireless computing system are facing increasing efficiency challenges due to high power consumption associated with managing the waste heat. We provide breakthrough in addressing these problems by developing thermo-magneto-electric generator (TMEG) arrays, composed of soft magnet and piezoelectric polyvinylidene difluoride (PVDF) cantilever. TMEG can serve dual role of extracting the waste heat and converting it into useable electricity. Near room temperature second-order magnetic phase transition in soft magnetic material, gadolinium, was employed to obtain mechanical vibrations on the PVDF cantilever under small thermal gradient. TMEGs were shown to achieve high vibration frequency at small temperature gradients, thereby, demonstrating effective heat transfer. PMID:28145516

Thermo-Magneto-Electric Generator Arrays for Active Heat Recovery System.

PubMed

Chun, Jinsung; Song, Hyun-Cheol; Kang, Min-Gyu; Kang, Han Byul; Kishore, Ravi Anant; Priya, Shashank

2017-02-01

Continued emphasis on development of thermal cooling systems is being placed that can cycle low grade heat. Examples include solar powered unmanned aerial vehicles (UAVs) and data storage servers. The power efficiency of solar module degrades at elevated temperature, thereby, necessitating the need for heat extraction system. Similarly, data centres in wireless computing system are facing increasing efficiency challenges due to high power consumption associated with managing the waste heat. We provide breakthrough in addressing these problems by developing thermo-magneto-electric generator (TMEG) arrays, composed of soft magnet and piezoelectric polyvinylidene difluoride (PVDF) cantilever. TMEG can serve dual role of extracting the waste heat and converting it into useable electricity. Near room temperature second-order magnetic phase transition in soft magnetic material, gadolinium, was employed to obtain mechanical vibrations on the PVDF cantilever under small thermal gradient. TMEGs were shown to achieve high vibration frequency at small temperature gradients, thereby, demonstrating effective heat transfer.

Fish-bone-structured acoustic sensor toward silicon cochlear systems

NASA Astrophysics Data System (ADS)

Harada, Muneo; Ikeuchi, Naoki; Fukui, Shoichi; Ando, Shigeru

1998-09-01

This paper describes a micro mechanical acoustic sensor modeling the basilar membrane of the human cochlea. The skeleton of the acoustic sensor is an array of resonators each of specific frequency selectivity. The mechanical structure of the sensor is designed using FEM analysis to have a particular geometrical structure looking like a fish bone that consists of cantilever ribs extending out from a backbone. Acoustic wave is supposed to be introduced to the diaphragm placed at one end of the backbone to travel in one way along the backbone. During traveling each frequency component of the wave is delivered to the corresponding cantilever according to its resonant frequency. The mechanical vibrations of each cantilever are detected in parallel by use of piezoresistors. The fish-bone structure is fabricated to be suspended in the air on a silicon substrate using silicon micromachining technology. We observe the frequency response of each cantilever to verify fairly sharp frequency selectivity associated with the one- way flow of the vibration energy. The present results encourage us to implement the human auditory system on a silicon chip toward the goal of silicon cochlea.

Complaint liquid metal electrodes for dielectric elastomer actuators

NASA Astrophysics Data System (ADS)

Finkenauer, Lauren R.; Majidi, Carmel

2014-03-01

This work presents a liquid-phase metal electrode to be used with poly(dimethylsiloxane) (PDMS) for a dielectric elastomer actuator (DEA). DEAs are favorable for soft-matter applications where high efficiency and response times are desirable. A consistent challenge faced during the fabrication of these devices is the selection and deposition of electrode material. While numerous designs have been demonstrated with a variety of conductive elastomers and greases, these materials have significant and often intrinsic shortcomings, e.g. low conductivity, hysteresis, incapability of large deformations, and complex fabrication requirements. The liquid metal alloy eutectic Gallium-Indium (EGaIn) is a promising alternative to existing compliant electrodes, having both high conductivity and complete soft-matter functionality. The liquid electrode shares almost the same electrical conductivity as conventional metal wiring and provides no mechanical resistance to bending or stretching of the DEA. This research establishes a straightforward and effective method for quickly depositing EGaIn electrodes, which can be adapted for batch fabrication, and demonstrates the successful actuation of sample curved cantilever elastomer actuators using these electrodes. As with the vast majority of electrostatically actuated elastomer devices, the voltage requirements for these curved DEAs are still quite significant, though modifications to the fabrication process show some improved electrical properties. The ease and speed with which this method can be implemented suggests that the development of a more electronically efficient device is realistic and worthwhile.

Adaptive piezoelectric sensoriactuators for active structural acoustic control

NASA Astrophysics Data System (ADS)

Vipperman, Jeffrey Stuart

1997-09-01

A new transducer technology with application to active control systems, modal analysis, and autonomous system health monitoring, is brought to fruition in this work. It has the advantages of being lightweight, potentially cost-effective, self-tuning, has negligible dynamics, and most importantly (from a robustness perspective), it provides a colocated sensor/actuator pair. The transducer consists of a piezoceramic element which serves as both an actuator and a sensor and will be referred to in this work as a sensoriactuator. Simple, adaptive signal processing in conjunction with a voltage controlled amplifier, reference capacitor, and a common-mode rejection circuit extract the mechanical response from the total response of the piezoelectric sensoriactuator for sensing. The digital portion of the adaptive piezoelectric sensoriactuator merely serves to tune the circuit, avoiding the potentially destabilizing effects of introducing a digital delay in the signal path, when used for feedback control applications. Adaptive compensation of the sensoriactuator is necessary since the signal to noise ratio is typically greater than 40 dB, making it prohibitive to tune the circuit manually. In addition, the constitutive properties of piezoceramics vary with time and environment, necessitating that the circuit be periodically re-tuned. The analog portion of the hardware is based upon op-amp circuits and an AD632 analog multiplier chip, which serves as both a voltage controlled amplifier (VCA) and a common mode rejection (CMR) circuit. A single coefficient least-mean square (LMS) adaptive filter continuously adjusts the gain of the VCA circuit as necessary. Nonideal behavior of piezoceramics is discussed along with methods to counter the consequential deterioration in circuit performance. A multiple input multiple output (MIMO) implementation of the adaptive piezoelectric sensoriactuator is developed using orthogonal white noise training signals for each sensoriactuator. Two piezostructures were used to demonstrate and verify the adaptive piezoelectric sensoriactuator, a cantilevered beam and a simply-supported plate. The experimental open- loop results compare well with theory. A preliminary closed-loop rate controller applied to the cantilevered beam demonstrates simultaneous control and adaptation of the piezoelectric sensoriactuator. Lastly, [/cal H]2 optimal feedback Active Structural Acoustic Control (ASAC) is demonstrated using the adaptive piezoelectric sensoriactuators and the simply- supported plate test bed. A cost function is formulated based upon control effort and predicted radiated acoustic power. Radiation filters are created to predict acoustic power based on the self and mutual radiation efficiencies of the plate modes to be controlled. Both static output feedback and state-feedback compensation as well as dynamic (Linear Quadratic Gaussian) compensation are investigated and compared analytically. The importance of choosing an appropriate spatial aperture for the piezoceramic transducer for static compensation is discussed. Finally, multivariable Active Vibration Control (AVC) and ASAC are implemented experimentally on a simply-supported plate test bed using an array of four Adaptive Piezoelectric Sensoriactuators as the control sensors and actuators. Unfavorable high-frequency response from the given piezoceramic transducers required that dynamic, Linear Quadratic Gaussian (LQG) compensation be used to achieve good control performance.

Linear micromechanical stepping drive for pinhole array positioning

NASA Astrophysics Data System (ADS)

Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Hoffmann, Martin

2015-05-01

A compact linear micromechanical stepping drive for positioning a 7 × 5.5 mm2 optical pinhole array is presented. The system features a step size of 13.2 µm and a full displacement range of 200 µm. The electrostatic inch-worm stepping mechanism shows a compact design capable of positioning a payload 50% of its own weight. The stepping drive movement, step sizes and position accuracy are characterized. The actuated pinhole array is integrated in a confocal chromatic hyperspectral imaging system, where coverage of the object plane, and therefore the useful picture data, can be multiplied by 14 in contrast to a non-actuated array.

Development of a Bio-inspired Microflap Array for Passive Control of Flow Separation

NASA Astrophysics Data System (ADS)

Devey, Sean; Morris, Jackson; Hubner, Paul; Lang, Amy

2017-11-01

The shortfin mako shark benefits from its flexible microscopic scales, or denticles; which can passively limit flow separation in water. These denticles can be passively actuated by incipient reversing flow in the lower 5% of the boundary layer, thereby impeding further flow reversal and promoting increased momentum exchange. In air, an array of flow actuated microflaps has the potential to provide similar benefits to man-made systems. Multiple iterations of microflap arrays have been developed and tested in the University of Alabama's Boundary Layer Tunnel. A variety of 3D-printed flaps derived from mako denticle geometries were arranged in rows with freedom to rotate, like mako denticles, to angles up to 50 degrees. Placing the microflap array in separated flow regions allowed for direct observation of the microflap response. Like mako denticles, microflaps with lengths of about 4 mm have been shown to actuate in response to reversing surface flows. This presentation will focus on the development and implementation of passive microflap arrays. This research was supported by Boeing, the US Army, and the National Science Foundation REU program.

Active control of flexural vibrations in beams

NASA Technical Reports Server (NTRS)

Gerhold, Carl H.

1987-01-01

The feasibility of using piezoelectric actuators to control the flexural oscillations of large structures in space is investigated. Flexural oscillations are excited by impulsive loads. The vibratory response can degrade the pointing accuracy of cameras and antennae, and can cause high stresses at structural node points. Piezoelectric actuators have the advantage of exerting localized bending moments. In this way, vibration is controlled without exciting rigid body modes. The actuators are used in collocated sensor/driver pairs to form a feedback control system. The sensor produces a voltage that is proportional to the dynamic stress at the sensor location, and the driver produces a force that is proportional to the voltage applied to it. The analog control system amplifies and phase shifts the sensor signal to produce the voltage signal that is applied to the driver. The feedback control is demonstrated to increase the first mode damping in a cantilever beam by up to 100 percent, depending on the amplifier gain. The damping efficiency of the control system when the piezoelectrics are not optimally positioned at points of high stress in the beam is evaluated.

Micromirror structure based on TiNi shape memory thin films

NASA Astrophysics Data System (ADS)

Fu, Yong Qing; Hu, Min; Du, Hejun; Luo, Jack; Flewitt, Andrew J.; Milne, William I.

2005-02-01

TiNi films were deposited on silicon by co-sputtering TiNi target and a separate Ti target at a temperature of 450°C. Results from differential scanning calorimeter, in-situ X-ray diffraction and curvature measurement revealed clearly martensitic transformation upon heating and cooling. Two types of TiNi/Si optical micromirror structures with a Si mirror cap (20 micron thick) and TiNi/Si actuation beams were designed and fabricated. For the first design, three elbow shaped Si beams with TiNi electrodes were used as the arms to actuate the mirror. In the second design, a V-shaped cantilever based on TiNi/Si bimorph beams was used as the actuation mechanism for micromirror. TiNi electrodes were patterned and wet-etched in a solutions of HF:HNO3:H2O (1:1:20) with an etch rate of 0.6 μm/min. The TiNi/Si microbeams were flat at room temperature, and bent up with applying voltage in TiNi electrodes (due to phase transformation and shape memory effect), thus causing the changes in angles of micromirror.

2D Electrostatic Actuation of Microshutter Arrays

NASA Technical Reports Server (NTRS)

Burns, Devin E.; Oh, Lance H.; Li, Mary J.; Jones, Justin S.; Kelly, Daniel P.; Zheng, Yun; Kutyrev, Alexander S.; Moseley, Samuel H.

2015-01-01

An electrostatically actuated microshutter array consisting of rotational microshutters (shutters that rotate about a torsion bar) were designed and fabricated through the use of models and experiments. Design iterations focused on minimizing the torsional stiffness of the microshutters, while maintaining their structural integrity. Mechanical and electromechanical test systems were constructed to measure the static and dynamic behavior of the microshutters. The torsional stiffness was reduced by a factor of four over initial designs without sacrificing durability. Analysis of the resonant behavior of the microshutter arrays demonstrates that the first resonant mode is a torsional mode occurring around 3000 Hz. At low vacuum pressures, this resonant mode can be used to significantly reduce the drive voltage necessary for actuation requiring as little as 25V. 2D electrostatic latching and addressing was demonstrated using both a resonant and pulsed addressing scheme.

Fatigue life characterization for piezoelectric macrofiber composites

NASA Astrophysics Data System (ADS)

Henslee, Isaac A.; Miller, David A.; Tempero, Tyler

2012-10-01

In an effort to aid the investigation into lightweight and reliable materials for actuator design, a study was developed to characterize the temperature-dependent lifetime performance of a piezoelectric macrofiber composite (MFC). MFCs are thin rectangular patches of polyimide film, epoxy and a single layer of rectangular lead zirconium titanate (PZT) fibers. In this study, the useful life of the MFC is characterized to determine the effect of temperature on the performance of the composite as it is fatigued by cyclic piezoelectric excitation. The test specimen consists of the MFC laminated to a cantilevered stainless steel beam. Beam strain and tip displacement measurements are used as a basis for determining the performance of the MFC as it is cyclically actuated under various operating temperatures. The temperature of the beam laminate is held constant and then cycled to failure, or 250 million cycles, in order to determine the useful life of the MFC over a temperature range from - 15 to 145 °C. The results of the experiments show a strong temperature dependence of the operational life for the MFC. Damage inside the composite was identified through in situ visual inspection and during post-test microstructural observation; however, no degradation in operational performance was identified as it was cyclically actuated up to the point of failure, regardless of temperature or actuation cycle number.

Hydrodynamic thrust generation and power consumption investigations for piezoelectric fins with different aspect ratios

NASA Astrophysics Data System (ADS)

Shahab, S.; Tan, D.; Erturk, A.

2015-12-01

Bio-inspired hydrodynamic thrust generation using piezoelectric transduction has recently been explored using Macro-Fiber Composite (MFC) actuators. The MFC technology strikes a balance between the actuation force and structural deformation levels for effective swimming performance, and additionally offers geometric scalability, silent operation, and ease of fabrication. Recently we have shown that mean thrust levels comparable to biological fish of similar size can be achieved using MFC fins. The present work investigates the effect of length-to-width (L/b) aspect ratio on the hydrodynamic thrust generation performance of MFC cantilever fins by accounting for the power consumption level. It is known that the hydrodynamic inertia and drag coefficients are controlled by the aspect ratio especially for L/b< 5. The three MFC bimorph fins explored in this work have the aspect ratios of 2.1, 3.9, and 5.4. A nonlinear electrohydroelastic model is employed to extract the inertia and drag coefficients from the vibration response to harmonic actuation for the first bending mode. Experiments are then conducted for various actuation voltage levels to quantify the mean thrust resultant and power consumption levels for different aspect ratios. Variation of the thrust coefficient of the MFC bimorph fins with changing aspect ratio is also semi-empirically modeled and presented.

The Mini-Mast CSI testbed: Lessons learned

NASA Technical Reports Server (NTRS)

Tanner, Sharon E.; Belvin, W. Keith; Horta, Lucas G.; Pappa, R. S.

1993-01-01

The Mini-Mast testbed was one of the first large scale Controls-Structure-Interaction (CSI) systems used to evaluate state-of-the-art methodology in flexible structure control. Now that all the testing at Langley Research Center has been completed, a look back is warranted to evaluate the program. This paper describes some of the experiences and technology development studies by NASA, university, and industry investigators. Lessons learned are presented from three categories: the testbed development, control methods, and the operation of a guest investigator program. It is shown how structural safety margins provided a realistic environment to simulate on-orbit CSI research, even though they also reduced the research flexibility afforded to investigators. The limited dynamic coupling between the bending and torsion modes of the cantilevered test article resulted in highly successful SISO and MIMO controllers. However, until accurate models were obtained for the torque wheel actuators, sensors, filters, and the structure itself, most controllers were unstable. Controls research from this testbed should be applicable to cantilevered appendages of future large space structures.

Nanobits, Nembranes and Micro Four-Point Probes: Customizable Tools for insitu Manipulation and Characterisation of Nanostructures

NASA Astrophysics Data System (ADS)

Boggild, Peter; Hjorth Petersen, Dirch; Sardan Sukas, Ozlem; Dam, Henrik Friis; Lei, Anders; Booth, Timothy; Molhave, Kristian; Eicchorn, Volkmar

2010-03-01

We present a range of highly adaptable microtools for direct interaction with nanoscale structures; (i) semiautomatic pick-and-place assembly of multiwalled carbon nanotubes onto cantilevers for high-aspect ratio scanning probe microscopy, using electrothermal microgrippers inside a SEM. Topology optimisation was used to calculate the optimal gripper shape defined by the boundary conditions, resulting in 10-100 times better performance. By instead pre-defining detachable tips using electron beam lithography, free-form scanning probe tips (Nanobits) can be mounted in virtually any position on a cantilever; (ii) scanning micro four point probes allow fast, non- destructive mapping of local electrical properties (sheet resistance and Hall mobility) and hysteresis effects of graphene sheets; (iii) sub 100 nm freestanding devices with wires, heaters, actuators, sensors, resonators and probes were defined in a 100 nm thin membrane with focused ion beam milling. By patterning generic membrane templates (Nembranes) the fabrication time of a TEM compatible NEMS device is effectively reduced to less around 20 minutes.

Optimizing Sensor and Actuator Arrays for ASAC Noise Control

NASA Technical Reports Server (NTRS)

Palumbo, Dan; Cabell, Ran

2000-01-01

This paper summarizes the development of an approach to optimizing the locations for arrays of sensors and actuators in active noise control systems. A type of directed combinatorial search, called Tabu Search, is used to select an optimal configuration from a much larger set of candidate locations. The benefit of using an optimized set is demonstrated. The importance of limiting actuator forces to realistic levels when evaluating the cost function is discussed. Results of flight testing an optimized system are presented. Although the technique has been applied primarily to Active Structural Acoustic Control systems, it can be adapted for use in other active noise control implementations.

Design and fabrication of non silicon substrate based MEMS energy harvester for arbitrary surface applications

NASA Astrophysics Data System (ADS)

Balpande, Suresh S.; Pande, Rajesh S.

2016-04-01

Internet of Things (IoT) uses MEMS sensor nodes and actuators to sense and control objects through Internet. IOT deploys millions of chemical battery driven sensors at different locations which are not reliable many times because of frequent requirement of charging & battery replacement in case of underground laying, placement at harsh environmental conditions, huge count and difference between demand (24 % per year) and availability (energy density growing rate 8% per year). Energy harvester fabricated on silicon wafers have been widely used in manufacturing MEMS structures. These devices require complex fabrication processes, costly chemicals & clean room. In addition to this silicon wafer based devices are not suitable for curved surfaces like pipes, human bodies, organisms, or other arbitrary surface like clothes, structure surfaces which does not have flat and smooth surface always. Therefore, devices based on rigid silicon wafers are not suitable for these applications. Flexible structures are the key solution for this problems. Energy transduction mechanism generates power from free surrounding vibrations or impact. Sensor nodes application has been purposefully selected due to discrete power requirement at low duty cycle. Such nodes require an average power budget in the range of about 0.1 microwatt to 1 mW over a period of 3-5 seconds. Energy harvester is the best alternate source in contrast with battery for sensor node application. Novel design of Energy Harvester based on cheapest flexible non silicon substrate i.e. cellulose acetate substrate have been modeled, simulated and analyzed on COMSOL multiphysics and fabricated using sol-gel spin coating setup. Single cantilever based harvester generates 60-75 mV peak electric potential at 22Hz frequency and approximately 22 µW power at 1K-Ohm load. Cantilever array can be employed for generating higher voltage by replicating this structure. This work covers design, optimization, fabrication of harvester and schottky diodes based voltage multiplier.

Design and fabrication of non silicon substrate based MEMS energy harvester for arbitrary surface applications

DOE Office of Scientific and Technical Information (OSTI.GOV)

Balpande, Suresh S., E-mail: balpandes@rknec.edu; Pande, Rajesh S.

Internet of Things (IoT) uses MEMS sensor nodes and actuators to sense and control objects through Internet. IOT deploys millions of chemical battery driven sensors at different locations which are not reliable many times because of frequent requirement of charging & battery replacement in case of underground laying, placement at harsh environmental conditions, huge count and difference between demand (24 % per year) and availability (energy density growing rate 8% per year). Energy harvester fabricated on silicon wafers have been widely used in manufacturing MEMS structures. These devices require complex fabrication processes, costly chemicals & clean room. In addition tomore » this silicon wafer based devices are not suitable for curved surfaces like pipes, human bodies, organisms, or other arbitrary surface like clothes, structure surfaces which does not have flat and smooth surface always. Therefore, devices based on rigid silicon wafers are not suitable for these applications. Flexible structures are the key solution for this problems. Energy transduction mechanism generates power from free surrounding vibrations or impact. Sensor nodes application has been purposefully selected due to discrete power requirement at low duty cycle. Such nodes require an average power budget in the range of about 0.1 microwatt to 1 mW over a period of 3-5 seconds. Energy harvester is the best alternate source in contrast with battery for sensor node application. Novel design of Energy Harvester based on cheapest flexible non silicon substrate i.e. cellulose acetate substrate have been modeled, simulated and analyzed on COMSOL multiphysics and fabricated using sol-gel spin coating setup. Single cantilever based harvester generates 60-75 mV peak electric potential at 22Hz frequency and approximately 22 µW power at 1K-Ohm load. Cantilever array can be employed for generating higher voltage by replicating this structure. This work covers design, optimization, fabrication of harvester and schottky diodes based voltage multiplier.« less

A Study on a Microwave-Driven Smart Material Actuator

NASA Technical Reports Server (NTRS)

Choi, Sang H.; Chu, Sang-Hyon; Kwak, M.; Cutler, A. D.

2001-01-01

NASA s Next Generation Space Telescope (NGST) has a large deployable, fragmented optical surface (greater than or = 2 8 m in diameter) that requires autonomous correction of deployment misalignments and thermal effects. Its high and stringent resolution requirement imposes a great deal of challenge for optical correction. The threshold value for optical correction is dictated by lambda/20 (30 nm for NGST optics). Control of an adaptive optics array consisting of a large number of optical elements and smart material actuators is so complex that power distribution for activation and control of actuators must be done by other than hard-wired circuitry. The concept of microwave-driven smart actuators is envisioned as the best option to alleviate the complexity associated with hard-wiring. A microwave-driven actuator was studied to realize such a concept for future applications. Piezoelectric material was used as an actuator that shows dimensional change with high electric field. The actuators were coupled with microwave rectenna and tested to correlate the coupling effect of electromagnetic wave. In experiments, a 3x3 rectenna patch array generated more than 50 volts which is a threshold voltage for 30-nm displacement of a single piezoelectric material. Overall, the test results indicate that the microwave-driven actuator concept can be adopted for NGST applications.

Environmentally responsive optical microstructured hybrid actuator assemblies and applications thereof

DOEpatents

Aizenberg, Joanna; Aizenberg, Michael; Kim, Philseok

2016-01-05

Microstructured hybrid actuator assemblies in which microactuators carrying designed surface properties to be revealed upon actuation are embedded in a layer of responsive materials. The microactuators in a microactuator array reversibly change their configuration in response to a change in the environment without requiring an external power source to switch their optical properties.

Characterization of bending EAP beams

NASA Technical Reports Server (NTRS)

Bao, Xiaoqi; Bar-Cohen, Yoseph; Chang, Zensheu; Sherrit, Stewart

2004-01-01

Electroactive polymers are attractive actuation materials because of their large deformation, flexibility, and lightweight. A CCD camera system was constructed to record the curved shapes of bending during the activation of EAP films and image-processing software was developed to digitize the bending curves. A computer program was developed to solve the invese problem of cantilever EAP beams with tip position limiter. using the developed program and acquired curves without tip position limiter as well as the corresponding tip force, the EAP material properties of voltage-strain sensitivity and Young's modulus were determined.

Measuring blocking force to interpret ionic mechanisms within bucky-gel actuators

NASA Astrophysics Data System (ADS)

Kruusamäe, Karl; Sugino, Takushi; Asaka, Kinji

2015-04-01

Bucky-gel laminates are tri-layer structures where polymeric electrolyte film is sandwiched between two compliant electrode layers of carbon nanotubes and ionic liquid. The resulting ionic and capacitive structures, being regarded as a type of electromechanically active polymers (EAP), have the perspective of becoming soft bending actuators in the fields such as biomimetic robotics or lab-on-chip technology. A typical electromechanical step response of a bucky-gel actuator in a cantilever configuration exhibits a fast bending displacement followed by some reverse motion referred to as the back-relaxation. It has been proposed that the bending but also the back-relaxation of bucky-gel laminates occur due to the relocation of cations and anions within the tri-layer structure. A great number of modeling about ionic EAP materials aims to predict the amplitude of free bending or the blocking force of the actuator. However, as the bucky-gel laminates are viscoelastic, the translation from generated force to bending amplitude is not always straightforward - it can take the form of an integro-differential equation with speed (i.e. the amplitude and type of the input signal) and temperature (i.e. the electronic conductivity of the material and driving current) as just some of the parameters. In this study we propose to use a so-called two carrier-model to analyze the electromechanical response of a bucky-gel actuator. After modifying the electrical equivalent circuit, the time domain response of blocking force is measured to elaborate the ionic mechanisms during the work-cycle of bucky-gel actuator.

Active Control of Fan Noise by Vane Actuators

NASA Technical Reports Server (NTRS)

Curtis, Alan R. D.

1999-01-01

An active noise control system for ducted fan noise was built that uses actuators located in stator vanes. The actuators were piezoelectric benders manufactured using the THUNDER technology and were custom designed for the application. The active noise control system was installed in the NASA ANCF rig. Four actuator array with a total of 168 actuators in 28 stator vanes were used. Simultaneous reductions of acoustic power in both the inlet and exhaust duct were demonstrated for a fan disturbance that contained two radial mode orders in both inlet and exhaust. Total power levels in the target modes were reduced by up to 9 dB in the inlet and total tone levels by over 6 dB while exhaust power levels were reduced by up to 3 dB. Far field sound pressure level reductions of up to 17 dB were observed. A simpler control system, matched to the location of the disturbance with two radial actuator arrays, was demonstrated to control total acoustic power in four disturbance modes simultaneously in inlet and exhaust. The vane actuator met the requirements given for the ANCF, although in practice the performance of the system was limited by the constraints of the power amplifiers and the presence of control spillover. The vane actuators were robust. None of the 168 vane actuators failed during the tests.

Band Excitation Kelvin probe force microscopy utilizing photothermal excitation

DOE PAGES

Collins, Liam; Jesse, Stephen; Balke, Nina; ...

2015-03-13

A multifrequency open loop Kelvin probe force microscopy (KPFM) approach utilizing photothermal as opposed to electrical excitation is developed. Photothermal band excitation (PthBE)-KPFM is implemented here in a grid mode on a model test sample comprising a metal-insulator junction with local charge-patterned regions. Unlike the previously described open loop BE-KPFM, which relies on capacitive actuation of the cantilever, photothermal actuation is shown to be highly sensitive to the electrostatic force gradient even at biases close to the contact potential difference (CPD). PthBE-KPFM is further shown to provide a more localized measurement of true CPD in comparison to the gold standardmore » ambient KPFM approach, amplitude modulated KPFM. In conclusion, PthBE-KPFM data contain information relating to local dielectric properties and electronic dissipation between tip and sample unattainable using conventional single frequency KPFM approaches.« less

Optically defined modal sensors incorporating spiropyran-doped liquid crystals with piezoelectric sensors.

PubMed

Chen, Kuan-Ting; Chang, Chin-Kai; Kuo, Hui-Lung; Lee, Chih-Kung

2011-01-01

We integrated a piezoelectric sensing layer lamina containing liquid crystals (LC) and spiropyran (SP) in a LC/SP mixture to create an optically reconfigurable modal sensor for a cantilever beam. The impedance of this LC/SP lamina was decreased by UV irradiation which constituted the underlying mechanism to modulate the voltage externally applied to the piezoelectric actuating layer. Illuminating a specific pattern onto the LC/SP lamina provided us with a way to spatially modulate the piezoelectric vibration signal. We showed that if an UV illuminated pattern matches the strain distribution of a specific mode, a piezoelectric modal sensor can be created. Since UV illumination can be changed in situ in real-time, our results confirm for the first time since the inception of smart sensors, that an optically tailored modal sensor can be created. Some potential applications of this type of sensor include energy harvesting devices, bio-chips, vibration sensing and actuating devices.

Unsteady Heat Transfer in Channel Flow using Small-Scale Vorticity Concentrations Effected by a Vibrating Reed

NASA Astrophysics Data System (ADS)

Hidalgo, Pablo; Glezer, Ari

2011-11-01

Heat transfer enhancement by small-scale vorticity concentrations that are induced within the core flow of a mm-scale heated channel are investigated experimentally. These small-scale motions are engendered by the cross stream vibrations of a streamwise cantilevered reed that spans most of the channel's width. The interactions between the reed the core flow over a range of flow rates lead to the formation, shedding, and advection of time-periodic vorticity concentrations that interact with the wall boundary layers, and increase cross stream mixing of the core flow. Heating of the channel walls is controlled using microfabricated serpentine resistive heaters embedded with streamwise arrays of temperature sensors. It is shown that the actuation disrupts the thermal boundary layers and result in significant enhancement of the local and global heat transfer along the channel compared to the baseline flow in the absence of the reed. The effect of the reed on the cross flow is measured using high resolution particle image velocimetry (PIV), and the reed motion is characterized using a laser-based position sensor. The blockage induced by the presence of the reed and its cross stream motion is characterized using detailed streamwise pressure distributions. Supported by DARPA and UTRC.

Nanomusical systems visualized and controlled in 4D electron microscopy.

PubMed

Baskin, J Spencer; Park, Hyun Soon; Zewail, Ahmed H

2011-05-11

Nanomusical systems, nanoharp and nanopiano, fabricated as arrays of cantilevers by focused ion beam milling of a layered Ni/Ti/Si(3)N(4) thin film, have been investigated in 4D electron microscopy. With the imaging and selective femtosecond and nanosecond control combinations, full characterization of the amplitude and phase of the resonant response of a particular cantilever relative to the optical pulse train was possible. Using a high repetition rate, low energy optical pulse train for selective, resonant excitation, coupled with pulsed and steady-state electron imaging for visualization in space and time, both the amplitude on the nanoscale and resonance of motion on the megahertz scale were resolved for these systems. Tilting of the specimen allowed in-plane and out-of-plane cantilever bending and cantilever torsional motions to be identified in stroboscopic measurements of impulsively induced free vibration. Finally, the transient, as opposed to steady state, thermostat effect was observed for the layered nanocantilevers, with a sufficiently sensitive response to demonstrate suitability for in situ use in thin-film temperature measurements requiring resolutions of <10 K and 10 μm on time scales here mechanically limited to microseconds and potentially at shorter times.

Grating array systems having a plurality of gratings operative in a coherently additive mode and methods for making such grating array systems

DOEpatents

Kessler, Terrance J [Mendon, NY; Bunkenburg, Joachim [Victor, NY; Huang, Hu [Pittsford, NY

2007-02-13

A plurality of gratings (G1, G2) are arranged together with a wavefront sensor, actuators, and feedback system to align the gratings in such a manner, that they operate like a single, large, monolithic grating. Sub-wavelength-scale movements in the mechanical mounting, due to environmental influences, are monitored by an interferometer (28), and compensated by precision actuators (16, 18, 20) that maintain the coherently additive mode. The actuators define the grating plane, and are positioned in response to the wavefronts from the gratings and a reference flat, thus producing the interferogram that contains the alignment information. Movement of the actuators is also in response to a diffraction-limited spot on the CCD (36) to which light diffracted from the gratings is focused. The actuator geometry is implemented to take advantage of the compensating nature of the degrees of freedom between gratings, reducing the number of necessary control variables.

A force transmission system based on a tulip-shaped electrostatic clutch for haptic display devices

NASA Astrophysics Data System (ADS)

Sasaki, Hikaru; Shikida, Mitsuhiro; Sato, Kazuo

2006-12-01

This paper describes a novel type of force transmission system for haptic display devices. The system consists of an array of end-effecter elements, a force/displacement transmitter and a single actuator producing a large force/displacement. It has tulip-shaped electrostatic clutch devices to distribute the force/displacement from the actuator among the individual end effecters. The specifications of three components were determined to stimulate touched human fingers. The components were fabricated by using micro-electromechanical systems and conventional machining technologies, and finally they were assembled by hand. The performance of the assembled transmission system was experimentally examined and it was confirmed that each projection in the arrayed end effecters could be moved individually. The actuator in a system whose total size was only 3.0 cm × 3.0 cm × 4.0 cm produced a 600 mN force and displaced individual array elements by 18 µm.

Smart Sensing and Dynamic Fitting for Enhanced Comfort and Performance of Prosthetics

DTIC Science & Technology

2015-10-01

developing the antenna pressure/shear sensors and the bubble actuators for pressure regulation. An antenna sensor that is capable of measuring shear and...liner materials. We have characterized the load bearing capability of bubble actuator arrays at different actuation pressures. A “limb-socket...laboratory test setup was developed for capturing the internal pressure change of bubble actuators when the “limb” was subjected to the external force. 15

Experimental investigations of the large deflection capabilities of a compliant parallel mechanism actuated by shape memory alloy wires

NASA Astrophysics Data System (ADS)

Sreekumar, M.; Nagarajan, T.; Singaperumal, M.

2008-12-01

This experimental study investigates the coupled effect of the force developed by the shape memory alloy (SMA) actuators and the force required for the large deflection of an elastica member in a compliant parallel mechanism. The compliant mechanism developed in house consists of a moving platform mounted on a superelastic pillar and three SMA wire actuators to manipulate the platform. A three-axis MEMS accelerometer has been mounted on the moving platform to measure its tilt angle. Three miniature force sensors have been designed and fabricated out of cantilever beams, each mounted with a pair of strain gauges, to measure the force developed by the respective actuators. The force sensors are highly sensitive and cost effective compared to commercially available miniature force sensors. Calibration of the force sensors has been accomplished with known weights, and for the three-axis MEMS accelerometer a rotary base has been considered which is usually used in optical applications. The calibration curves obtained, with R-squared values between 0.9997 and 1.0, show that both the tilt and force sensors considered are most appropriate for the respective applications. The mechanism fixed with the sensors and the drivers for the SMA actuators is integrated with a National Instrument's data acquisition system. The experimental results have been compared with the analytical results and it was found that the relative error is less than 2%. This is a preliminary study in the development of a mechanism for eye prosthesis and similar applications.

The small length scale effect for a non-local cantilever beam: a paradox solved.

PubMed

Challamel, N; Wang, C M

2008-08-27

Non-local continuum mechanics allows one to account for the small length scale effect that becomes significant when dealing with microstructures or nanostructures. This paper presents some simplified non-local elastic beam models, for the bending analyses of small scale rods. Integral-type or gradient non-local models abandon the classical assumption of locality, and admit that stress depends not only on the strain value at that point but also on the strain values of all points on the body. There is a paradox still unresolved at this stage: some bending solutions of integral-based non-local elastic beams have been found to be identical to the classical (local) solution, i.e. the small scale effect is not present at all. One example is the Euler-Bernoulli cantilever nanobeam model with a point load which has application in microelectromechanical systems and nanoelectromechanical systems as an actuator. In this paper, it will be shown that this paradox may be overcome with a gradient elastic model as well as an integral non-local elastic model that is based on combining the local and the non-local curvatures in the constitutive elastic relation. The latter model comprises the classical gradient model and Eringen's integral model, and its application produces small length scale terms in the non-local elastic cantilever beam solution.

An ultra-precision tool nanoindentation instrument for replication of single point diamond tool cutting edges

NASA Astrophysics Data System (ADS)

Cai, Yindi; Chen, Yuan-Liu; Xu, Malu; Shimizu, Yuki; Ito, So; Matsukuma, Hiraku; Gao, Wei

2018-05-01

Precision replication of the diamond tool cutting edge is required for non-destructive tool metrology. This paper presents an ultra-precision tool nanoindentation instrument designed and constructed for replication of the cutting edge of a single point diamond tool onto a selected soft metal workpiece by precisely indenting the tool cutting edge into the workpiece surface. The instrument has the ability to control the indentation depth with a nanometric resolution, enabling the replication of tool cutting edges with high precision. The motion of the diamond tool along the indentation direction is controlled by the piezoelectric actuator of a fast tool servo (FTS). An integrated capacitive sensor of the FTS is employed to detect the displacement of the diamond tool. The soft metal workpiece is attached to an aluminum cantilever whose deflection is monitored by another capacitive sensor, referred to as an outside capacitive sensor. The indentation force and depth can be accurately evaluated from the diamond tool displacement, the cantilever deflection and the cantilever spring constant. Experiments were carried out by replicating the cutting edge of a single point diamond tool with a nose radius of 2.0 mm on a copper workpiece surface. The profile of the replicated tool cutting edge was measured using an atomic force microscope (AFM). The effectiveness of the instrument in precision replication of diamond tool cutting edges is well-verified by the experimental results.

Design and Fabrication of Electrostatically Actuated Silicon Microshutters Arrays

NASA Technical Reports Server (NTRS)

Oh, L.; Li, M.; Kim, K.; Kelly, D.; Kutyrev, A.; Moseley, S.

2017-01-01

We have developed a new fabrication process to actuate microshutter arrays (MSA) electrostatically at NASA Goddard Space Flight Center. The microshutters are fabricated on silicon with thin silicon nitride membranes. A pixel size of each microshutter is 100 x 200 micrometers 2. The microshutters rotate 90 degrees on torsion bars. The selected microshutters are actuated, held, and addressed electrostatically by applying voltages on the electrodes the front and back sides of the microshutters. The atomic layer deposition (ALD) of aluminum oxide was used to insulate electrodes on the back side of walls; the insulation can withstand over 100 V. The ALD aluminum oxide is dry etched, and then the microshutters are released in vapor HF.

Input Shaping to Reduce Solar Array Structural Vibrations

NASA Technical Reports Server (NTRS)

Doherty, Michael J.; Tolson, Robert J.

1998-01-01

Structural vibrations induced by actuators can be minimized using input shaping. Input shaping is a feedforward method in which actuator commands are convolved with shaping functions to yield a shaped set of commands. These commands are designed to perform the maneuver while minimizing the residual structural vibration. In this report, input shaping is extended to stepper motor actuators. As a demonstration, an input-shaping technique based on pole-zero cancellation was used to modify the Solar Array Drive Assembly (SADA) actuator commands for the Lewis satellite. A series of impulses were calculated as the ideal SADA output for vibration control. These impulses were then discretized for use by the SADA stepper motor actuator and simulated actuator outputs were used to calculate the structural response. The effectiveness of input shaping is limited by the accuracy of the knowledge of the modal frequencies. Assuming perfect knowledge resulted in significant vibration reduction. Errors of 10% in the modal frequencies caused notably higher levels of vibration. Controller robustness was improved by incorporating additional zeros in the shaping function. The additional zeros did not require increased performance from the actuator. Despite the identification errors, the resulting feedforward controller reduced residual vibrations to the level of the exactly modeled input shaper and well below the baseline cases. These results could be easily applied to many other vibration-sensitive applications involving stepper motor actuators.

Design Methodology of a Dual-Halbach Array Linear Actuator with Thermal-Electromagnetic Coupling

PubMed Central

Eckert, Paulo Roberto; Flores Filho, Aly Ferreira; Perondi, Eduardo; Ferri, Jeferson; Goltz, Evandro

2016-01-01

This paper proposes a design methodology for linear actuators, considering thermal and electromagnetic coupling with geometrical and temperature constraints, that maximizes force density and minimizes force ripple. The method allows defining an actuator for given specifications in a step-by-step way so that requirements are met and the temperature within the device is maintained under or equal to its maximum allowed for continuous operation. According to the proposed method, the electromagnetic and thermal models are built with quasi-static parametric finite element models. The methodology was successfully applied to the design of a linear cylindrical actuator with a dual quasi-Halbach array of permanent magnets and a moving-coil. The actuator can produce an axial force of 120 N and a stroke of 80 mm. The paper also presents a comparative analysis between results obtained considering only an electromagnetic model and the thermal-electromagnetic coupled model. This comparison shows that the final designs for both cases differ significantly, especially regarding its active volume and its electrical and magnetic loading. Although in this paper the methodology was employed to design a specific actuator, its structure can be used to design a wide range of linear devices if the parametric models are adjusted for each particular actuator. PMID:26978370

Design Methodology of a Dual-Halbach Array Linear Actuator with Thermal-Electromagnetic Coupling.

PubMed

Eckert, Paulo Roberto; Flores Filho, Aly Ferreira; Perondi, Eduardo; Ferri, Jeferson; Goltz, Evandro

2016-03-11

This paper proposes a design methodology for linear actuators, considering thermal and electromagnetic coupling with geometrical and temperature constraints, that maximizes force density and minimizes force ripple. The method allows defining an actuator for given specifications in a step-by-step way so that requirements are met and the temperature within the device is maintained under or equal to its maximum allowed for continuous operation. According to the proposed method, the electromagnetic and thermal models are built with quasi-static parametric finite element models. The methodology was successfully applied to the design of a linear cylindrical actuator with a dual quasi-Halbach array of permanent magnets and a moving-coil. The actuator can produce an axial force of 120 N and a stroke of 80 mm. The paper also presents a comparative analysis between results obtained considering only an electromagnetic model and the thermal-electromagnetic coupled model. This comparison shows that the final designs for both cases differ significantly, especially regarding its active volume and its electrical and magnetic loading. Although in this paper the methodology was employed to design a specific actuator, its structure can be used to design a wide range of linear devices if the parametric models are adjusted for each particular actuator.

Fabrication of Pop-up Detector Arrays on Si Wafers

NASA Technical Reports Server (NTRS)

Li, Mary J.; Allen, Christine A.; Gordon, Scott A.; Kuhn, Jonathan L.; Mott, David B.; Stahle, Caroline K.; Wang, Liqin L.

1999-01-01

High sensitivity is a basic requirement for a new generation of thermal detectors. To meet the requirement, close-packed, two-dimensional silicon detector arrays have been developed in NASA Goddard Space Flight Center. The goal of the task is to fabricate detector arrays configured with thermal detectors such as infrared bolometers and x-ray calorimeters to use in space fliGht missions. This paper focuses on the fabrication and the mechanical testing of detector arrays in a 0.2 mm pixel size, the smallest pop-up detectors being developed so far. These array structures, nicknamed "PUDS" for "Pop-Up Detectors", are fabricated on I pm thick, single-crystal, silicon membranes. Their designs have been refined so we can utilize the flexibility of thin silicon films by actually folding the silicon membranes to 90 degrees in order to obtain close-packed two-dimensional arrays. The PUD elements consist of a detector platform and two legs for mechanical support while also serving as electrical and thermal paths. Torsion bars and cantilevers connecting the detector platform to the legs provide additional flexures for strain relief. Using micro-electromechanical structure (MEMS) fabrication techniques, including photolithography, anisotropic chemical etching, reactive-ion etching, and laser dicing, we have fabricated PLTD detector arrays of fourteen designs with a variation of four parameters including cantilever length, torsion bar length and width, and leg length. Folding tests were conducted to test mechanical stress distribution for the array structures. We obtained folding yields and selected optimum design parameters to reach minimal stress levels. Computer simulation was also employed to verify mechanical behaviors of PUDs in the folding process. In addition, scanning electron microscopy was utilized to examine the flatness of detectors and the alignment of detector pixels in arrays. The fabrication of thermistors and heaters on the pop-up detectors is under way, preparing us for the next step of the experiment, the thermal test.

An orientation measurement method based on Hall-effect sensors for permanent magnet spherical actuators with 3D magnet array.

PubMed

Yan, Liang; Zhu, Bo; Jiao, Zongxia; Chen, Chin-Yin; Chen, I-Ming

2014-10-24

An orientation measurement method based on Hall-effect sensors is proposed for permanent magnet (PM) spherical actuators with three-dimensional (3D) magnet array. As there is no contact between the measurement system and the rotor, this method could effectively avoid friction torque and additional inertial moment existing in conventional approaches. Curved surface fitting method based on exponential approximation is proposed to formulate the magnetic field distribution in 3D space. The comparison with conventional modeling method shows that it helps to improve the model accuracy. The Hall-effect sensors are distributed around the rotor with PM poles to detect the flux density at different points, and thus the rotor orientation can be computed from the measured results and analytical models. Experiments have been conducted on the developed research prototype of the spherical actuator to validate the accuracy of the analytical equations relating the rotor orientation and the value of magnetic flux density. The experimental results show that the proposed method can measure the rotor orientation precisely, and the measurement accuracy could be improved by the novel 3D magnet array. The study result could be used for real-time motion control of PM spherical actuators.

Positioning actuators in efficient locations for rendering the desired sound field using inverse approach

NASA Astrophysics Data System (ADS)

Cho, Wan-Ho; Ih, Jeong-Guon; Toi, Takeshi

2015-12-01

For rendering a desired characteristics of a sound field, a proper conditioning of acoustic actuators in an array are required, but the source condition depends strongly on its position. Actuators located at inefficient positions for control would consume the input power too much or become too much sensitive to disturbing noise. These actuators can be considered redundant, which should be sorted out as far as such elimination does not damage the whole control performance significantly. It is known that the inverse approach based on the acoustical holography concept, employing the transfer matrix between sources and field points as core element, is useful for rendering the desired sound field. By investigating the information indwelling in the transfer matrix between actuators and field points, the linear independency of an actuator from the others in the array can be evaluated. To this end, the square of the right singular vector, which means the radiation contribution from the source, can be used as an indicator. Inefficient position for fulfilling the desired sound field can be determined as one having smallest indicator value among all possible actuator positions. The elimination process continues one by one, or group by group, until the remaining number of actuators meets the preset number. Control examples of exterior and interior spaces are taken for the validation. The results reveal that the present method for choosing least dependent actuators, for a given number of actuators and field condition, is quite effective in realizing the desired sound field with a noisy input condition, and in minimizing the required input power.

Construction of a Piezoresistive Neural Sensor Array

NASA Technical Reports Server (NTRS)

Carlson, W. B.; Schulze, W. A.; Pilgrim, P. M.

1996-01-01

The construction of a piezoresistive - piezoelectric sensor (or actuator) array is proposed using 'neural' connectivity for signal recognition and possible actuation functions. A closer integration of the sensor and decision functions is necessary in order to achieve intrinsic identification within the sensor. A neural sensor is the next logical step in development of truly 'intelligent' arrays. This proposal will integrate 1-3 polymer piezoresistors and MLC electroceramic devices for applications involving acoustic identification. The 'intelligent' piezoresistor -piezoelectric system incorporates printed resistors, composite resistors, and a feedback for the resetting of resistances. A model of a design is proposed in order to simulate electromechanical resistor interactions. The goal of optimizing a sensor geometry for improving device reliability, training, & signal identification capabilities is the goal of this work. At present, studies predict performance of a 'smart' device with a significant control of 'effective' compliance over a narrow pressure range due to a piezoresistor percolation threshold. An interesting possibility may be to use an array of control elements to shift the threshold function in order to change the level of resistance in a neural sensor array for identification, or, actuation applications. The proposed design employs elements of: (1) conductor loaded polymers for a 'fast' RC time constant response; and (2) multilayer ceramics for actuation or sensing and shifting of resistance in the polymer. Other material possibilities also exist using magnetoresistive layered systems for shifting the resistance. It is proposed to use a neural net configuration to test and to help study the possible changes required in the materials design of these devices. Numerical design models utilize electromechanical elements, in conjunction with structural elements in order to simulate piezoresistively controlled actuators and changes in resistance of sensors. The construction of these devices may show significant improvement in ability to interrogate signals and in the control of effective compliance. This work focuses on the development a variety of series/parallel interconnected piezoresistive control elements for the neural sensing function.

Supinator Extender (SUE): a pneumatically actuated robot for forearm/wrist rehabilitation after stroke.

PubMed

Allington, James; Spencer, Steven J; Klein, Julius; Buell, Meghan; Reinkensmeyer, David J; Bobrow, James

2011-01-01

The robot described in this paper, SUE (Supinator Extender), adds forearm/wrist rehabilitation functionality to the UCI BONES exoskeleton robot and to the ArmeoSpring rehabilitation device. SUE is a 2-DOF serial chain that can measure and assist forearm supination-pronation and wrist flexion-extension. The large power to weight ratio of pneumatic actuators allows SUE to achieve the forces needed for rehabilitation therapy while remaining lightweight enough to be carried by BONES and ArmeoSpring. Each degree of freedom has a range of 90 degrees, and a nominal torque of 2 ft-lbs. The cylinders are mounted away from the patient's body on the lateral aspect of the arm. This is to prevent the danger of a collision and maximize the workspace of the arm robot. The rotation axis used for supination-pronation is a small bearing just below the subject's wrist. The flexion-extension motion is actuated by a cantilevered pneumatic cylinder, which allows the palm of the hand to remain open. Data are presented that demonstrate the ability of SUE to measure and cancel forearm/wrist passive tone, thereby extending the active range of motion for people with stroke.

Capillary instability of periodic polymer structures: Influence of viscosity, substrate confinement and local curvature

NASA Astrophysics Data System (ADS)

Zhang, Zheng; Ding, Yifu

2015-03-01

NMR spectrum and spin-lattice relaxation time(T1) of CaF2 thin film samples deposited on a silicon cantilever tip were obtained by magnetic resonance force microscopy(MRFM). Thickness of the thin films were 50nm and 150nm. In order to measure T1, a cyclic adiabatic inversion method was used with periodic phase inversion. A comparison of the bulk and two thin films showed that T1 becomes shorter as the film thickness decreases. To make the comparison as accurate as possible, all three samples were loaded onto different beams of a multi-cantilever array and measured in the same experimental conditions such as temperature and magnetic field.

Piezoelectric actuator uses sequentially-excited multiple elements: A concept

NASA Technical Reports Server (NTRS)

Sabelman, E. E.

1972-01-01

Utilizing arrays of sequentially-excited piezoelectric elements to provide motion in a nonmagnetic motor provide built-in redundancy and long life required for deployment or actuation of devices on spacecraft. Linear-motion motor devices can also be fabricated.

High fill-factor micromirror array using a self-aligned vertical comb drive actuator with two rotational axes

NASA Astrophysics Data System (ADS)

Kim, Minsoo; Park, Jae-Hyoung; Jeon, Jin-A.; Yoo, Byung-Wook; Park, I. H.; Kim, Yong-Kweon

2009-03-01

We present a two-axis micromirror array with high fill-factor, using a new fabrication procedure on the full wafer scale. The micromirror comprises a self-aligned vertical comb drive actuator with a mirror plate mounted on it and electrical lines on a bottom substrate. A high-aspect-ratio vertical comb drive was built using a bulk micromachining technique on a silicon-on-insulator (SOI) wafer. The thickness of the torsion spring was adjusted using multiple silicon etching steps to enhance the static angular deflection of the mirrors. To address the array, electrical lines were fabricated on a glass substrate and combined with the comb actuators using an anodic bonding process. The silicon mirror plate was fabricated together with the actuator using a wafer bonding process and segmented at the final release step. The actuator and addressing lines were hidden behind the mirror plate, resulting in a high fill-factor of 84% in an 8 × 8 array of micromirrors, each 340 µm × 340 µm. The fabricated mirror plate has a high-quality optical surface with an average surface roughness (Ra) of 4 nm and a curvature radius of 0.9 m. The static and dynamic responses of the micromirror were characterized by comparing the measured results with the calculated values. The maximum static optical deflection for the outer axis is 4.32° at 60 V, and the maximum inner axis tilting angle is 2.82° at 96 V bias. The torsion resonance frequencies along the outer and inner axes were 1.94 kHz and 0.95 kHz, respectively.

Patterning nonisometric origami in nematic elastomer sheets

NASA Astrophysics Data System (ADS)

Plucinsky, Paul; Kowalski, Benjamin A.; White, Timothy J.; Bhattacharya, Kaushik

Nematic elastomers dramatically change their shape in response to diverse stimuli including light and heat. In this paper, we provide a systematic framework for the design of complex three dimensional shapes through the actuation of heterogeneously patterned nematic elastomer sheets. These sheets are composed of \\textit{nonisometric origami} building blocks which, when appropriately linked together, can actuate into a diverse array of three dimensional faceted shapes. We demonstrate both theoretically and experimentally that: 1) the nonisometric origami building blocks actuate in the predicted manner, 2) the integration of multiple building blocks leads to complex multi-stable, yet predictable, shapes, 3) we can bias the actuation experimentally to obtain a desired complex shape amongst the multi-stable shapes. We then show that this experimentally realized functionality enables a rich possible design landscape for actuation using nematic elastomers. We highlight this landscape through theoretical examples, which utilize large arrays of these building blocks to realize a desired three dimensional origami shape. In combination, these results amount to an engineering design principle, which we hope will provide a template for the application of nematic elastomers to emerging technologies.

Micromechanical Switches on GaAs for Microwave Applications

NASA Technical Reports Server (NTRS)

Randall, John N.; Goldsmith, Chuck; Denniston, David; Lin, Tsen-Hwang

1995-01-01

In this presentation, we describe the fabrication of micro-electro-mechanical system (MEMS) devices, in particular, of low-frequency multi-element electrical switches using SiO2 cantilevers. The switches discussed are related to micromechanical membrane structures used to perform switching of optical signals on silicon substrates. These switches use a thin metal membrane which is actuated by an electrostatic potential, causing the switch to make or break contact. The advantages include: superior isolation, high power handling capabilities, high radiation hardening, very low power operations, and the ability to integrate onto GaAs monolithic microwave integrated circuit (MMIC) chips.

Impulse damping control of an experimental structure

NASA Technical Reports Server (NTRS)

Redmond, J.; Meyer, J. L.; Silverberg, L.

1993-01-01

The characteristics associated with the fuel optimal control of a harmonic oscillator are extended to develop a near minimum fuel control algorithm for the vibration suppression of spacecraft. The operation of single level thrusters is regulated by recursive calculations of the standard deviations of displacement and velocity resulting in a bang-off-bang controller. A vertically suspended 16 ft cantilevered beam was used in the experiment. Results show that the structure's response was easily manipulated by minor alterations in the control law and the control system performance was not seriously degraded in the presence of multiple actuator failures.

MEMS fluidic actuator

DOEpatents

Kholwadwala, Deepesh K [Albuquerque, NM; Johnston, Gabriel A [Trophy Club, TX; Rohrer, Brandon R [Albuquerque, NM; Galambos, Paul C [Albuquerque, NM; Okandan, Murat [Albuquerque, NM

2007-07-24

The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.

Analysis of SMA Hybrid Composite Structures in MSC.Nastran and ABAQUS

NASA Technical Reports Server (NTRS)

Turner, Travis L.; Patel, Hemant D.

2005-01-01

A thermoelastic constitutive model for shape memory alloy (SMA) actuators and SMA hybrid composite (SMAHC) structures was recently implemented in the commercial finite element codes MSC.Nastran and ABAQUS. The model may be easily implemented in any code that has the capability for analysis of laminated composite structures with temperature dependent material properties. The model is also relatively easy to use and requires input of only fundamental engineering properties. A brief description of the model is presented, followed by discussion of implementation and usage in the commercial codes. Results are presented from static and dynamic analysis of SMAHC beams of two types; a beam clamped at each end and a cantilever beam. Nonlinear static (post-buckling) and random response analyses are demonstrated for the first specimen. Static deflection (shape) control is demonstrated for the cantilever beam. Approaches for modeling SMAHC material systems with embedded SMA in ribbon and small round wire product forms are demonstrated and compared. The results from the commercial codes are compared to those from a research code as validation of the commercial implementations; excellent correlation is achieved in all cases.

Advanced electric-field scanning probe lithography on molecular resist using active cantilever

NASA Astrophysics Data System (ADS)

Kaestner, Marcus; Aydogan, Cemal; Lipowicz, Hubert-Seweryn; Ivanov, Tzvetan; Lenk, Steve; Ahmad, Ahmad; Angelov, Tihomir; Reum, Alexander; Ishchuk, Valentyn; Atanasov, Ivaylo; Krivoshapkina, Yana; Hofer, Manuel; Holz, Mathias; Rangelow, Ivo W.

2015-03-01

The routine "on demand" fabrication of features smaller than 10 nm opens up new possibilities for the realization of many novel nanoelectronic, NEMS, optical and bio-nanotechnology-based devices. Based on the thermally actuated, piezoresistive cantilever technology we have developed a first prototype of a scanning probe lithography (SPL) platform able to image, inspect, align and pattern features down to single digit nano regime. The direct, mask-less patterning of molecular resists using active scanning probes represents a promising path circumventing the problems in today's radiation-based lithography. Here, we present examples of practical applications of the previously published electric field based, current-controlled scanning probe lithography on molecular glass resist calixarene by using the developed tabletop SPL system. We demonstrate the application of a step-and-repeat scanning probe lithography scheme including optical as well as AFM based alignment and navigation. In addition, sequential read-write cycle patterning combining positive and negative tone lithography is shown. We are presenting patterning over larger areas (80 x 80 μm) and feature the practical applicability of the lithographic processes.

Analysis of SMA Hybrid Composite Structures using Commercial Codes

NASA Technical Reports Server (NTRS)

Turner, Travis L.; Patel, Hemant D.

2004-01-01

A thermomechanical model for shape memory alloy (SMA) actuators and SMA hybrid composite (SMAHC) structures has been recently implemented in the commercial finite element codes MSC.Nastran and ABAQUS. The model may be easily implemented in any code that has the capability for analysis of laminated composite structures with temperature dependent material properties. The model is also relatively easy to use and requires input of only fundamental engineering properties. A brief description of the model is presented, followed by discussion of implementation and usage in the commercial codes. Results are presented from static and dynamic analysis of SMAHC beams of two types; a beam clamped at each end and a cantilevered beam. Nonlinear static (post-buckling) and random response analyses are demonstrated for the first specimen. Static deflection (shape) control is demonstrated for the cantilevered beam. Approaches for modeling SMAHC material systems with embedded SMA in ribbon and small round wire product forms are demonstrated and compared. The results from the commercial codes are compared to those from a research code as validation of the commercial implementations; excellent correlation is achieved in all cases.

A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array

DOE PAGES

Hopkins, Jonathan B.; Panas, Robert M.; Song, Yuanping; ...

2016-12-01

This work introduces the design of a high fill-factor (>99%) micromirror array (MMA) that consists of 1mm2 hexagonal mirrors, which are expected to each independently achieve continuous, closed-loop control of three degrees of freedom (DOFs)—tip, tilt, and piston—over large ranges (>±10o rotation and >±30μm translation) at high speeds (~45kHz for a 1o amplitude of rotational oscillation). The flexure topology of this array is designed using the Freedom, Actuation, and Constraint Topologies (FACT) synthesis approach, which utilizes geometric shapes to help designers rapidly consider every flexure topology that best achieves a desired set of DOFs driven by decoupled actuators. The geometrymore » of this array’s comb-drive actuators are optimized in conjunction with the geometry of the system’s flexures using a novel approach. The analytical models underlying this approach are verified using finite element analysis (FEA) and validated using experimental data. The capabilities of this new mirror array will enable, or significantly improve, the performance of a variety of high-impact optical technologies such as advanced optical switches, spatial-light modulators, displays, and laser steering or scanning devices.« less

A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array

DOE Office of Scientific and Technical Information (OSTI.GOV)

Hopkins, Jonathan B.; Panas, Robert M.; Song, Yuanping

This work introduces the design of a high fill-factor (>99%) micromirror array (MMA) that consists of 1mm2 hexagonal mirrors, which are expected to each independently achieve continuous, closed-loop control of three degrees of freedom (DOFs)—tip, tilt, and piston—over large ranges (>±10o rotation and >±30μm translation) at high speeds (~45kHz for a 1o amplitude of rotational oscillation). The flexure topology of this array is designed using the Freedom, Actuation, and Constraint Topologies (FACT) synthesis approach, which utilizes geometric shapes to help designers rapidly consider every flexure topology that best achieves a desired set of DOFs driven by decoupled actuators. The geometrymore » of this array’s comb-drive actuators are optimized in conjunction with the geometry of the system’s flexures using a novel approach. The analytical models underlying this approach are verified using finite element analysis (FEA) and validated using experimental data. The capabilities of this new mirror array will enable, or significantly improve, the performance of a variety of high-impact optical technologies such as advanced optical switches, spatial-light modulators, displays, and laser steering or scanning devices.« less

DOE Office of Scientific and Technical Information (OSTI.GOV)

Dong, Rui; Moore, Logan; Ocola, Leonidas E.

The mask-free patterning technique is employed to fabricate arrays of MoS2 and WS2 structures on silicon and graphene substrates with quality interfaces. By depositing precursor inks with the AFM cantilevers and subsequent heat treatment in the CVD furnace, it is demonstrated that MoS2 and WS2 structures can be formed on graphene surfaces at predefined device architectures.

Properties of Miniature Cantilever-Type Ultrasonic Motor Using Lead-Free Array-Type Multilayer Piezoelectric Ceramics of (Sr,Ca)2NaNb5O15 under High Input Power

NASA Astrophysics Data System (ADS)

Doshida, Yutaka; Shimizu, Hiroyuki; Mizuno, Youich; Tamura, Hideki

2012-07-01

The properties of miniature cantilever-type ultrasonic motors using lead-free array-type multilayer piezoelectric ceramics of (Sr,Ca)2NaNb5O15 (SCNN) developed using the design rule were investigated under high input power by comparison with the high-power properties of SCNN ceramics. The frequency dependence of the revolution speed reflected the nonlinear behavior of SCNN ceramics with the hard-spring effect and showed a mirror-reversed image relative to that of the motor of Pb(Zr,Ti)O3 (PZT) ceramics. The output power increased linearly with increasing input power up to 110 mW without heat generation, and the driving properties were almost the same as the expectations under low input power. The output power density characteristics of the motors were high in comparison with those of the commercialized motors of PZT ceramics. It appeared that the motors have a high potential as an environmental friendly piezoelectric device with excellent properties, reflecting the high-power properties of SCNN ceramics.

A numerical study on flexoelectric bistable energy harvester

NASA Astrophysics Data System (ADS)

Kumar, Anuruddh; Sharma, Anshul; Vaish, Rahul; Kumar, Rajeev; Jain, Satish Chandra

2018-07-01

A flexoelectric energy harvesting can be a viable solution of energy source for low power devices and sensors due to its higher performance at nano/micro domain size. Numerical study has been performed on energy harvester based on flexoelectric phenomenon of dielectric materials. Cantilever type structure was opted here as it induces the polarization due to the breaking of lattice symmetry upon bending. Host layer of cantilever is made of barium strontium titanate (BST) as it has high flexoelectric coefficient, and electrodes are attached with the host layer to collect the charges. In this study, nonlinearity has been introduced using pair of magnets at the free end of the cantilever. Characteristics of the harvester performance (linear-non-linear) changes by varying the distance between magnets. Results revealed that the bistable energy harvester gives more operating frequency range when excitation is random as compared to the linear energy harvester. For the given dimension of the harvester, when magnets distance d = 6 mm, effective harvesting frequency ranges are 5-17.3 and 17.6-26 Hz as compared to linear harvester. Further, role of load resistance was investigated to understand the impact on the performance. Hysteresis loop between voltage and displacement significantly varies with the resistance. This hysteresis loop confirmed the backward coupling of flexoelectric layer, in which voltage affects the displacement due to actuation. Area under the hysteresis loop is maximum for optimum resistance value (20.4 kΩ) which confirms the maximum extraction of power during vibration.

Nanocantilevers with Adjustable Static Deflection and Significantly Tunable Spectrum Resonant Frequencies for Applications in Nanomechanical Mass Sensors

PubMed Central

Stachiv, Ivo; Sittner, Petr

2018-01-01

Nanocantilevers have become key components of nanomechanical sensors that exploit changes in their resonant frequencies or static deflection in response to the environment. It is necessary that they can operate at a given, but adjustable, resonant frequency and/or static deflection ranges. Here we propose a new class of nanocantilevers with a significantly tunable spectrum of the resonant frequencies and changeable static deflection utilizing the unique properties of a phase-transforming NiTi film sputtered on the usual nanotechnology cantilever materials. The reversible frequency tuning and the adjustable static deflection are obtained by intentionally changing the Young’s modulus and the interlayer stress of the NiTi film during its phase transformation, while the usual cantilever elastic materials guarantee a high frequency actuation (up to tens of MHz). By incorporating the NiTi phase transformation characteristic into the classical continuum mechanics theory we present theoretical models that account for the nanocantilever frequency shift and variation in static deflection caused by a phase transformation of NiTi film. Due to the practical importance in nanomechanical sensors, we carry out a complete theoretical analysis and evaluate the impact of NiTi film on the cantilever Young’s modulus, static deflection, and the resonant frequencies. Moreover, the importance of proposed NiTi nanocantilever is illustrated on the nanomechanical based mass sensors. Our findings will be of value in the development of advanced nanotechnology sensors with intentionally-changeable physical and mechanical properties. PMID:29462996

An Orientation Measurement Method Based on Hall-effect Sensors for Permanent Magnet Spherical Actuators with 3D Magnet Array

PubMed Central

Yan, Liang; Zhu, Bo; Jiao, Zongxia; Chen, Chin-Yin; Chen, I-Ming

2014-01-01

An orientation measurement method based on Hall-effect sensors is proposed for permanent magnet (PM) spherical actuators with three-dimensional (3D) magnet array. As there is no contact between the measurement system and the rotor, this method could effectively avoid friction torque and additional inertial moment existing in conventional approaches. Curved surface fitting method based on exponential approximation is proposed to formulate the magnetic field distribution in 3D space. The comparison with conventional modeling method shows that it helps to improve the model accuracy. The Hall-effect sensors are distributed around the rotor with PM poles to detect the flux density at different points, and thus the rotor orientation can be computed from the measured results and analytical models. Experiments have been conducted on the developed research prototype of the spherical actuator to validate the accuracy of the analytical equations relating the rotor orientation and the value of magnetic flux density. The experimental results show that the proposed method can measure the rotor orientation precisely, and the measurement accuracy could be improved by the novel 3D magnet array. The study result could be used for real-time motion control of PM spherical actuators. PMID:25342000

Using Pot-Magnets to Enable Stable and Scalable Electromagnetic Tactile Displays.

PubMed

Zarate, Juan Jose; Shea, Herbert

2017-01-01

We present the design, fabrication, characterization, and psychophysical testing of a scalable haptic display based on electromagnetic (EM) actuators. The display consists of a 4 × 4 array of taxels, each of which can be in a raised or a lowered position, thus generating different static configurations. One of the most challenging aspects when designing densely-packed arrays of EM actuators is obtaining large actuation forces while simultaneously generating only weak interactions between neighboring taxels. In this work, we introduce a lightweight and effective magnetic shielding architecture. The moving part of each taxel is a cylindrical permanent magnet embedded in a ferromagnetic pot, forming a pot-magnet. An array of planar microcoils attracts or repels each pot-magnet. This configuration reduces the interaction between neighboring magnets by more than one order of magnitude, while the coil/magnet interaction is only reduced by 10 percent. For 4 mm diameter pins on an 8 mm pitch, we obtained displacements of 0.55 mm and forces of 40 mN using 1.7 W. We measured the accuracy of human perception under two actuation configurations which differed in the force versus displacement curve. We obtained 91 percent of correct answers in pulling configuration and 100 percent in pushing configuration.

Transverse piezoelectric coefficient measurement of flexible lead zirconate titanate thin films

DOE Office of Scientific and Technical Information (OSTI.GOV)

Dufay, T.; Guiffard, B.; Seveno, R.

Highly flexible lead zirconate titanate, Pb(Zr,Ti)O{sub 3} (PZT), thin films have been realized by modified sol-gel process. The transverse piezoelectric coefficient d{sub 31} was determined from the tip displacement of bending-mode actuators made of PZT cantilever deposited onto bare or RuO{sub 2} coated aluminium substrate (16 μm thick). The influence of the thickness of ruthenium dioxide RuO{sub 2} and PZT layers was investigated for Pb(Zr{sub 0.57}Ti{sub 0.43})O{sub 3}. The modification of Zr/Ti ratio from 40/60 to 60/40 was done for 3 μm thick PZT thin films onto aluminium (Al) and Al/RuO{sub 2} substrates. A laser vibrometer was used to measure the beammore » displacement under controlled electric field. The experimental results were fitted in order to find the piezoelectric coefficient. Very large tip deflections of about 1 mm under low voltage (∼8 V) were measured for every cantilevers at the resonance frequency (∼180 Hz). For a given Zr/Ti ratio of 58/42, it was found that the addition of a 40 nm thick RuO{sub 2} interfacial layer between the aluminium substrate and the PZT layer induces a remarkable increase of the d{sub 31} coefficient by a factor of 2.7, thus corresponding to a maximal d{sub 31} value of 33 pC/N. These results make the recently developed PZT/Al thin films very attractive for both low frequency bending mode actuating applications and vibrating energy harvesting.« less

Sensing Device with Whisker Elements

NASA Technical Reports Server (NTRS)

Hartmann, Mitra J. (Inventor); Solomon, Joseph H. (Inventor)

2013-01-01

A sensing device includes an elongated whisker element having a flexible cantilever region and a base region where a change in moment or curvature is generated by bending of the cantilever region when it contacts an object. One or more sensor elements cooperatively associated with the whisker element provide one or more output signals that is/are representative of two orthogonal components of change in moment or curvature at the whisker base region to permit determination of object distance, fluid velocity profile, or object contour (shape) with accounting for lateral slip of the whisker element and frictional characteristics of the object. Multiple sensing devices can be arranged in arrays in a manner to sense object contour without or with adjustment for lateral slip.

Sensing device with whisker elements

NASA Technical Reports Server (NTRS)

Hartmann, Mitra J. (Inventor); Solomon, Joseph H. (Inventor)

2010-01-01

A sensing device includes an elongated whisker element having a flexible cantilever region and a base region where a change in moment or curvature is generated by bending of the cantilever region when it contacts an object. One or more sensor elements cooperatively associated with the whisker element provide one or more output signals that is/are representative of two orthogonal components of change in moment or curvature at the whisker base region to permit determination of object distance, fluid velocity profile, or object contour (shape) with accounting for lateral slip of the whisker element and frictional characteristics of the object. Multiple sensing devices can be arranged in arrays in a manner to sense object contour without or with adjustment for lateral slip.

Computational investigation of hydrokinetic turbine arrays in an open channel using an actuator disk-LES model

NASA Astrophysics Data System (ADS)

Kang, Seokkoo; Yang, Xiaolei; Sotiropoulos, Fotis

2012-11-01

While a considerable amount of work has focused on studying the effects and performance of wind farms, very little is known about the performance of hydrokinetic turbine arrays in open channels. Unlike large wind farms, where the vertical fluxes of momentum and energy from the atmospheric boundary layer comprise the main transport mechanisms, the presence of free surface in hydrokinetic turbine arrays inhibits vertical transport. To explore this fundamental difference between wind and hydrokinetic turbine arrays, we carry out LES with the actuator disk model to systematically investigate various layouts of hydrokinetic turbine arrays mounted on the bed of a straight open channel with fully-developed turbulent flow fed at the channel inlet. Mean flow quantities and turbulence statistics within and downstream of the arrays will be analyzed and the effect of the turbine arrays as means for increasing the effective roughness of the channel bed will be extensively discussed. This work was supported by Initiative for Renewable Energy & the Environment (IREE) (Grant No. RO-0004-12), and computational resources were provided by Minnesota Supercomputing Institute.

Functionalization of optical nanotip arrays with an electrochemical microcantilever for multiplexed DNA detection.

PubMed

Descamps, Emeline; Duroure, Nathalie; Deiss, Frédérique; Leichlé, Thierry; Adam, Catherine; Mailley, Pascal; Aït-Ikhlef, Ali; Livache, Thierry; Nicu, Liviu; Sojic, Neso

2013-08-07

Optical nanotip arrays fabricated on etched fiber bundles were functionalized with DNA spots. Such unconventional substrates (3D and non-planar) are difficult to pattern with standard microfabrication techniques but, using an electrochemical cantilever, up to 400 spots were electrodeposited on the nanostructured optical surface in 5 min. This approach allows each spot to be addressed individually and multiplexed fluorescence detection is demonstrated. Finally, remote fluorescence detection was performed by imaging through the optical fiber bundle itself after hybridisation with the complementary sequence.

A haptic sensor-actor-system based on ultrasound elastography and electrorheological fluids for virtual reality applications in medicine.

PubMed

Khaled, W; Ermert, H; Bruhns, O; Boese, H; Baumann, M; Monkman, G J; Egersdoerfer, S; Meier, A; Klein, D; Freimuth, H

2003-01-01

Mechanical properties of biological tissue represent important diagnostic information and are of histological relevance (hard lesions, "nodes" in organs: tumors; calcifications in vessels: arteriosclerosis). The problem is, that such information is usually obtained by digital palpation only, which is limited with respect to sensitivity. It requires intuitive assessment and does not allow quantitative documentation. A suitable sensor is required for quantitative detection of mechanical tissue properties. On the other hand, there is also some need for a realistic mechanical display of those tissue properties. Suitable actuator arrays with high spatial resolution and real-time capabilities are required operating in a haptic sensor actuator system with different applications. The sensor system uses real time ultrasonic elastography whereas the tactile actuator is based on electrorheological fluids. Due to their small size the actuator array elements have to be manufactured by micro-mechanical production methods. In order to supply the actuator elements with individual high voltages a sophisticated switching and control concept have been designed. This haptic system has the potential of inducing real time substantial forces, using a compact lightweight mechanism which can be applied to numerous areas including intraoperative navigation, telemedicine, teaching, space and telecommunication.

Analysis of a Chevron Beam Thermal Actuator

NASA Astrophysics Data System (ADS)

Joshi, Amey Sanjay; Mohammed, Hussain; Kulkarni, S. M., Dr.

2018-02-01

Thermal MEMS (Micro-Electro-Mechanical Systems) actuators and sensors have a wide range of applications. The chevron type thermal actuators comparatively show superior performance over other existing electrostatic and thermal actuators. This paper describes the design and analysis of chevron type thermal actuator. Here standard design of Chevron type thermal actuator is considered which comprises of proof mass at center and array of six beams of a uniform cross section of 3 3 microns and an initial angle of 5°. The thermal actuator was designed and analyzed using analytical and finite element method and the results were compared. The model was also analyzed for initial angles of 2.5° and 7.5°, and the results were compared with FEA model. The cross section of the beam was varied and the finite element analysis of all three models was compared to suggest the best suitable thermal actuator structure.

Microfabrication and characterization of an array of dielectric elastomer actuators generating uniaxial strain to stretch individual cells

NASA Astrophysics Data System (ADS)

Akbari, S.; Shea, H. R.

2012-04-01

Cells regulate their behavior in response to mechanical strains. Cell cultures to study mechanotransuction are typically cm2 in area, far too large to monitor single cell response. We have developed an array of dielectric elastomer microactuators as a tool to study mechanotransduction of individual cells. The array consists of 72 100 µm × 200 µm electroactive polymer actuators which expand uniaxially when a voltage is applied. Single cells will be attached on each actuator to study their response to periodic mechanical strains. The device is fabricated by patterning compliant microelectrodes on both sides of a 30 µm thick polydimethylsiloxane membrane, which is bonded to a Pyrex chip with 200 µm wide trenches. Low-energy metal ion implantation is used to make stretchable electrodes and we demonstrate here the successful miniaturization of such ion-implanted electrodes. The top electrode covers the full membrane area, while the bottom electrodes are 100 µm wide parallel lines, perpendicular to the trenches. Applying a voltage between the top and bottom electrodes leads to uniaxial expansion of the membrane at the intersection of the bottom electrodes and the trenches. To characterize the in-plane strain, an array of 4 µm diameter aluminum dots is deposited on each actuator. The position of each dot is tracked, allowing displacement and strain profiles to be measured as a function of voltage. The uniaxial strain reaches 4.7% at 2.9 kV with a 0.2 s response time, sufficient to stimulate most cells with relevant biological strains and frequencies.

Arrays of EAP micro-actuators for single-cell stretching applications

NASA Astrophysics Data System (ADS)

Akbari, S.; Niklaus, M.; Shea, H.

2010-04-01

Mechanical stimuli are critical for the development and maintenance of most tissues such as muscles, cartilage, bones and blood vessels. The commercially available cell culture systems replicating the in vivo environment are typically based on simple membrane cell-stretching equipment, which can only measure the average response of large colonies of cells over areas of greater than one cm2. We present here the conceptual design and the complete fabrication process of an array of 128 Electro-Active Polymer (EAP) micro-actuators which are uni-axially stretched and hence used to impose unidirectional strain on single cells, make it feasible to do experiments on the cytomechanics of individual cells. The Finite Element Method is employed to study the effect of different design parameters on achievable strain, leading to the optimized design. Compliant gold electrodes are deposited by low-energy ion implantation on both sides of a PDMS membrane, as this technique allows making electrodes that support large strain with minimal stiffening of the elastomer. The membrane is bonded to a rigid support, leading to an array of 100×100 μm2 EAP actuators.

Miniature Low-Mass Drill Actuated by Flextensional Piezo Stack

NASA Technical Reports Server (NTRS)

Sherrit, Stewart; Badescu, Mircea; Bar-Cohen, Yoseph

2010-01-01

Recent experiments with a flextensional piezoelectric actuator have led to the development of a sampler with a bit that is designed to produce and capture a full set of sample forms including volatiles, powdered cuttings, and core fragments. The flextensional piezoelectric actuator is a part of a series of devices used to amplify the generated strain from piezoelectric actuators. Other examples include stacks, bimorphs, benders, and cantilevers. These devices combine geometric and resonance amplifications to produce large stroke at high power density. The operation of this sampler/drill was demonstrated using a 3x2x1-cm actuator weighing 12 g using power of about 10-W and a preload of about 10 N. A limestone block was drilled to a depth of about 1 cm in five minutes to produce powdered cuttings. It is generally hard to collect volatiles from random surface profiles found in rocks and sediment, powdered cuttings, and core fragments. Toward the end of collecting volatiles, the actuator and the bit are covered with bellows-shaped shrouds to prevent fines and other debris from reaching the analyzer. A tube with a miniature bellows (to provide flexibility) is connected to the bit and directs the flow of the volatiles to the analyzer. Another modality was conceived where the hose is connected to the bellows wall directly to allow the capture of volatiles generated both inside and outside the bit. A wide variety of commercial bellows used in the vacuum and microwave industries can be used to design the volatiles capture mechanism. The piezoelectric drilling mechanism can potentially be operated in a broad temperature range from about-200 to less than 450 C. The actuators used here are similar to the actuators that are currently baselined to fly as part of the inlet funnel shaking mechanism design of MSL (Mars Science Laboratory). The space qualification of these parts gives this drill a higher potential for inclusion in a future mission, especially when considering its characteristics of low mass, small size, low power, and low axial loads for sampling.

2D Electrostatic Actuation of Microshutter Arrays

NASA Technical Reports Server (NTRS)

Burns, Devin E.; Oh, Lance H.; Li, Mary J.; Kelly, Daniel P.; Kutyrev, Alexander S.; Moseley, Samuel H.

2015-01-01

Electrostatically actuated microshutter arrays consisting of rotational microshutters (shutters that rotate about a torsion bar) were designed and fabricated through the use of models and experiments. Design iterations focused on minimizing the torsional stiffness of the microshutters, while maintaining their structural integrity. Mechanical and electromechanical test systems were constructed to measure the static and dynamic behavior of the microshutters. The torsional stiffness was reduced by a factor of four over initial designs without sacrificing durability. Analysis of the resonant behavior of the microshutters demonstrates that the first resonant mode is a torsional mode occurring around 3000 Hz. At low vacuum pressures, this resonant mode can be used to significantly reduce the drive voltage necessary for actuation requiring as little as 25V. 2D electrostatic latching and addressing was demonstrated using both a resonant and pulsed addressing scheme.

Automated tuning of an eight-channel cardiac transceive array at 7 tesla using piezoelectric actuators.

PubMed

Keith, Graeme A; Rodgers, Christopher T; Hess, Aaron T; Snyder, Carl J; Vaughan, J Thomas; Robson, Matthew D

2015-06-01

Ultra-high field (UHF) MR scanning in the body requires novel coil designs due to B1 field inhomogeneities. In the transverse electromagnetic field (TEM) design, maximum B1 transmit power can only be achieved if each individual transmit element is tuned and matched for different coil loads, which requires a considerable amount of valuable scanner time. An integrated system for autotuning a multichannel parallel transmit (pTx) cardiac TEM array was devised, using piezoelectric actuators, power monitoring equipment and control software. The reproducibility and performance of the system were tested and the power responses of the coil elements were profiled. An automated optimization method was devised and evaluated. The time required to tune an eight-element pTx cardiac RF array was reduced from a mean of 30 min to less than 10 min with the use of this system. Piezoelectric actuators are an attractive means of tuning RF coil arrays to yield more efficient B1 transmission into the subject. An automated mechanism for tuning these elements provides a practical solution for cardiac imaging at UHF, bringing this technology closer to clinical use. © 2014 The Authors. Magnetic Resonance in Medicine published by Wiley Periodicals, Inc. on behalf of International Society for Magnetic Resonance in Medicine.

Digital holographic characterization of liquid microlenses array fabricated in electrode-less configuration

NASA Astrophysics Data System (ADS)

Miccio, L.; Vespini, V.; Grilli, S.; Paturzo, M.; Finizio, A.; De Nicola, S.; Ferraro, P.

2009-06-01

We show how thin liquid film on polar dielectric substrate can form an array of liquid micro-lenses. The effect is driven by the pyroelectric effect leading to a new concept in electro-wetting (EW). EW is a viable method for actuation of liquids in microfluidic systems and requires the design and fabrication of complex electrodes for suitable actuation of liquids. When compared to conventional electrowetting devices, the pyroelectric effect allowed to have an electrode-less and circuitless configuration. In our case the surface electric charge induced by the thermal stimulus is able to pattern selectively the surface wettability according to geometry of the ferroelectric domains micro-engineered into the lithium niobate crystal. We show that different geometries of liquid microlenses can be obtained showing also a tuneability of the focal lenses down to 1.6 mm. Thousand of liquid microlenses, each with 100 μm diameter, can be formed and actuated. Also different geometries such as hemi-cylindrical and toroidal liquid structures can be easily obtained. By means of a digital holography method, an accurate characterization of the micro-lenses curvature is performed and presented. The preliminary results concerning the imaging capability of the micro-lens array are also reported. Microlens array can find application in medical stereo-endoscopy, imaging, telecommunication and optical data storage too.

Tensile-stressed microelectromechanical apparatus and micromirrors formed therefrom

DOEpatents

Fleming, James G [Albuquerque, NM

2006-05-16

A microelectromechanical (MEM) apparatus is disclosed which includes one or more tensile-stressed actuators that are coupled through flexures to a stage on a substrate. The tensile-stressed actuators, which can be formed from tensile-stressed tungsten or silicon nitride, initially raise the stage above the substrate without any applied electrical voltage, and can then be used to control the height or tilt angle of the stage. An electrostatic actuator can also be used in combination with each tensile-stressed actuator. The MEM apparatus has applications for forming piston micromirrors or tiltable micromirrors and independently addressable arrays of such devices.

Environmentally Powered Yarn Arrays that Sense, Actuate, Harvest, and Store Energy (NBIT III)

DTIC Science & Technology

2016-11-15

than the gravimetric power generation capability of a cars combustion engine and (2) functioned as a torsional artificial muscle to rotate a heavy...rotor to over 90,000 rpm. By driving this torsional actuation using 19.6C fluctuations in air temperature, we obtained an average output electrical ...rpm. By driving this torsional actuation using 19.6°C fluctuations in air temperature, we obtained an average output electrical power of 124 W per

The development and test of a long-life, high reliability solar array drive actuator

NASA Technical Reports Server (NTRS)

Kirkpatrick, D. L.

1973-01-01

To meet the life and reliability requirements of five to ten year space missions, a new solar array drive mechanism for 3-axis stabilized vehicles has been developed and is undergoing life testing. The drive employs a redundant lubrication system to increase its reliability. An overrunning clutch mechanism is used to permit block redundant application of two or more drives to a common array drive shaft. Two prototype actuator and clutch assemblies, in continuous vacuum life test under load at 10 to the minus 8th power torr for more than sixteen months, have each accumulated more than 34,000 output revolutions without anomaly, the equivalent of more than seven years of operation in a 1000 km orbit or nearly ninety-five years at synchronous altitude.

A novel soft biomimetic microrobot with two motion attitudes.

PubMed

Shi, Liwei; Guo, Shuxiang; Li, Maoxun; Mao, Shilian; Xiao, Nan; Gao, Baofeng; Song, Zhibin; Asaka, Kinji

2012-12-06

 A variety of microrobots have commonly been used in the fields of biomedical engineering and underwater operations during the last few years. Thanks to their compact structure, low driving power, and simple control systems, microrobots can complete a variety of underwater tasks, even in limited spaces. To accomplish our objectives, we previously designed several bio-inspired underwater microrobots with compact structure, flexibility, and multi-functionality, using ionic polymer metal composite (IPMC) actuators. To implement high-position precision for IPMC legs, in the present research, we proposed an electromechanical model of an IPMC actuator and analysed the deformation and actuating force of an equivalent IPMC cantilever beam, which could be used to design biomimetic legs, fingers, or fins for an underwater microrobot. We then evaluated the tip displacement of an IPMC actuator experimentally. The experimental deflections fit the theoretical values very well when the driving frequency was larger than 1 Hz. To realise the necessary multi-functionality for adapting to complex underwater environments, we introduced a walking biomimetic microrobot with two kinds of motion attitudes: a lying state and a standing state. The microrobot uses eleven IPMC actuators to move and two shape memory alloy (SMA) actuators to change its motion attitude. In the lying state, the microrobot implements stick-insect-inspired walking/rotating motion, fish-like swimming motion, horizontal grasping motion, and floating motion. In the standing state, it implements inchworm-inspired crawling motion in two horizontal directions and grasping motion in the vertical direction. We constructed a prototype of this biomimetic microrobot and evaluated its walking, rotating, and floating speeds experimentally. The experimental results indicated that the robot could attain a maximum walking speed of 3.6 mm/s, a maximum rotational speed of 9°/s, and a maximum floating speed of 7.14 mm/s. Obstacle-avoidance and swimming experiments were also carried out to demonstrate its multi-functionality.

A soft actuation system for segmented reflector articulation and isolation

NASA Technical Reports Server (NTRS)

Agronin, Michael L.; Jandura, Louise

1990-01-01

Segmented reflectors have been proposed for space based applications such as optical communication and large diameter telescopes. An actuation system for mirrors in a space based segmented mirror array was developed as part of NASA's Precision Segmented Reflector program. The actuation system, called the Articulated Panel Module (APM), provides 3 degrees of freedom mirror articulation, gives isolation from structural motion, and simplifies space assembly of the mirrors to the reflector backup truss. A breadboard of the APM was built and is described.

Deformation and Flexibility Equations for Idealized ARIS Umbilicals, Under Planar End-Loading Conditions

NASA Technical Reports Server (NTRS)

Hampton, R. David; Quraishi, Naveed (Technical Monitor)

2003-01-01

The International Space Station (ISS) relies on the Active Rack Isolation System (ARIS) as the central component of an integrated, station-wide strategy to isolate microgravity space-science experiments. ARIS uses electromechanical actuators to isolate an International Standard Payload Rack (ISPR) from disturbances due to the motion of the ISS. Disturbances to microgravity experiments on ARIS-isolated racks are primarily transmitted via the ARTS power and vacuum umbilicals. Recent experimental tests indicate that these umbilicals resonate at frequencies outside the ARIS controller's bandwidth, at levels of potential concern for certain microgravity experiments. Reduction in the umbilical resonant frequencies could help to address this issue. This report develops equations for the in-plane deflections and flexibilities of an idealized umbilical (thin, flexible, cantilever beam) under end-point, in-plane loading (inclined-force and moment). The effect of gravity is neglected due to the on-orbit application. The analysis assumes an initially straight, cantilevered umbilical with uniform cross-section, which undergoes large deflections with no plastic deformation, such that the umbilical terminus remains in a single quadrant and the umbilical slope changes monotonically. The analysis is applicable to the ARIS power and vacuum umbilicals, under the indicated assumptions.

Graphene as a Platform for Hybrid Optomechanical Devices

NASA Astrophysics Data System (ADS)

Bouchiat, Vincent; Reserbat-Plantey, Antoine; Kalita, Dipankar; Marty, Laetitia; Arcizet, Olivier; Bendiab, Nedjma

2013-03-01

Graphene is known for providing a flat 2D material with outstanding optical, electrical and mechanical properties. We propose to take advantage of all three features by developing an optomechanical platform based on cantilevers made of freestanding multilayer graphene connected to an electrode. In this talk I will present several examples of a simple optomechanical systems involving a multilayer graphene suspended cantilevers that can act as a mirror closing an optical cavity. By varying the gate voltage applied on the mirror, its angle can be adjusted on a wide range (exceeding the wavelength of the incoming light) and its motion can be actuated and followed in real time from DC up to the tens of MHz range. Detection of elastic and inelastic scattered light can be performed. It allows simultaneous detection of motion, local stress and temperature of the membrane. A fully spectral detection of NEMS resonance is presented (1) and allows a novel optomechanical scheme based on coupling between motion and light through the dynamic mechanical stress. Further applications are presented as well such as a gate tunable enhancement of the Raman signal of molecular species adsorbed on the graphene platform. (1) Reserbat-Plantey, A., et al, Nature Nanotechnology, vol. 7, 151-155. (2012).

Deformation and Flexibility Equations for Idealized ARIS Umbilicals, Under Planar End-Loading Conditions

NASA Technical Reports Server (NTRS)

Hampton, R. David; Quraishi, Naveed; Rupert, Jason K.

2000-01-01

The International Space Station (ISS) relies on the Active Rack Isolation System (ARIS) as the central component of an integrated, station-wide strategy to isolate microgravity space-science experiments. ARIS uses electromechanical actuators to isolate an International Standard Payload Rack (ISPR) from disturbances due to the motion of the ISS. Disturbances to microgravity experiments on ARIS-isolated racks are primarily transmitted via the ARIS power and vacuum umbilicals. Recent experimental tests indicate that these umbilicals resonate at frequencies outside the ARIS controller's bandwidth. at levels of potential concern for certain microgravity experiments. Reduction in the umbilical resonant frequencies could help to address this issue. This paper develops equations for the in-plane deflections and flexibilities of an idealized umbilical (thin, flexible, cantilever beam) under end-point, in-plane loading (inclined-force and moment). The effect of gravity is neglected due to the on:orbit application. The analysis assumes an initially straight. cantilevered umbilical with uniform cross-section. which undergoes large deflections with no plastic deformation, such that the umbilical terminus remains in a single quadrant and the umbilical slope changes monotonically. The analysis is applicable to the ARIS power and vacuum umbilicals. under the indicated assumptions.

Deformation and Flexibility Equations for ARIS Umbilicals Idealized as Planar Elastica

NASA Technical Reports Server (NTRS)

Hampton, R. David; Leamy, Michael J.; Bryant, Paul J.; Quraishi, Naveed

2005-01-01

The International Space Station relies on the active rack isolation system (ARIS) as the central component of an integrated, stationwide strategy to isolate microgravity space-science experiments. ARIS uses electromechanical actuators to isolate an international standard payload rack from disturbances due to the motion of the Space Station. Disturbances to microgravity experiments on ARIS isolated racks are transmitted primarily via the ARIS power and vacuum umbilicals. Experimental tests indicate that these umbilicals resonate at frequencies outside the ARIS controller s bandwidth at levels of potential concern for certain microgravity experiments. Reduction in the umbilical resonant frequencies could help to address this issue. This work documents the development and verification of equations for the in-plane deflections and flexibilities of an idealized umbilical (thin, flexible, inextensible, cantilever beam) under end-point, in-plane loading (inclined-force and moment). The effect of gravity is neglected due to the on-orbit application. The analysis assumes an initially curved (not necessarily circular), cantilevered umbilical with uniform cross-section, which undergoes large deflections with no plastic deformation, such that the umbilical slope changes monotonically. The treatment is applicable to the ARIS power and vacuum umbilicals under the indicated assumptions.

Method and apparatus for minimizing multiple degree of freedom vibration transmission between two regions of a structure

NASA Technical Reports Server (NTRS)

Silcox, Richard J. (Inventor); Fuller, Chris R. (Inventor); Gibbs, Gary P. (Inventor)

1992-01-01

Arrays of actuators are affixed to structural elements to impede the transmission of vibrational energy. A single pair is used to provide control of bending and extensional waves and two pairs are used to control torsional motion. The arrays are applied to a wide variety of structural elements such as a beam structure that is part of a larger framework that may or may not support a rigid or non-rigid skin. Electrical excitation is applied to the actuators that generate forces on the structure. These electrical inputs may be adjusted in their amplitude and phase by a controller in communication with appropriate vibrational wave sensors to impede the flow of vibrational power in all of the above mentioned wave forms beyond the actuator location. Additional sensor elements can be used to monitor the performance and adjust the electrical inputs to maximize the attenuation of vibrational energy.

Analyzing refractive index changes and differential bending in microcantilever arrays.

PubMed

Huber, François; Lang, Hans Peter; Hegner, Martin; Despont, Michel; Drechsler, Ute; Gerber, Christoph

2008-08-01

A new microcantilever array design is investigated comprising eight flexible microcantilevers introducing two solid bars, enabling to subtract contributions from differences in refractive index in an optical laser read out system. Changes in the refractive index do not contribute undesirably to bending signals at picomolar to micromolar DNA or protein concentrations. However, measurements of samples with high salt concentrations or serum are affected, requiring corrections for refractive index artifacts. Moreover, to obtain a deeper understanding of molecular stress formation, the differential curvature of cantilevers is analyzed by positioning the laser spots along the surface of the levers during pH experiments.

Design, fabrication and characterization of an arrayable all-polymer microfluidic valve employing highly magnetic rare-earth composite polymer

NASA Astrophysics Data System (ADS)

Rahbar, Mona; Shannon, Lesley; Gray, Bonnie L.

2016-05-01

We present a new magnetically actuated microfluidic valve that employs a highly magnetic composite polymer (M-CP) containing rare-earth hard-magnetic powder for its actuating element and for its valve seat. The M-CP offers much higher magnetization compared to the soft-magnetic, ferrite-based composite polymers typically used in microfluidic applications. Each valve consists of a permanently magnetized M-CP flap and valve seat mounted on a microfluidic channel system fabricated in poly(dimethylsiloxane) (PDMS). Each valve is actuated under a relatively small external magnetic field of 80 mT provided by a small permanent magnet mounted on a miniature linear actuator. The performance of the valve with different flap thicknesses is characterized. In addition, the effect of the magnetic valve seat on the valve’s performance is also characterized. It is experimentally shown that a valve with a 2.3 mm flap thickness, actuated under an 80 mT magnetic field, is capable of completely blocking liquid flow at a flow rate of 1 ml min-1 for pressures up to 9.65 kPa in microfluidic channels 200 μm wide and 200 μm deep. The valve can also be fabricated into an array for flow switching between multiple microfluidic channels under continuous flow conditions. The performance of arrays of valves for flow routing is demonstrated for flow rates up to 5 ml min-1 with larger microfluidic channels of up to 1 mm wide and 500 μm deep. The design of the valves is compatible with other commonly used polymeric microfluidic components, as well as other components that use the same novel permanently magnetic composite polymer, such as our previously reported cilia-based mixing devices.

The optimization of force inputs for active structural acoustic control using a neural network

NASA Technical Reports Server (NTRS)

Cabell, R. H.; Lester, H. C.; Silcox, R. J.

1992-01-01

This paper investigates the use of a neural network to determine which force actuators, of a multi-actuator array, are best activated in order to achieve structural-acoustic control. The concept is demonstrated using a cylinder/cavity model on which the control forces, produced by piezoelectric actuators, are applied with the objective of reducing the interior noise. A two-layer neural network is employed and the back propagation solution is compared with the results calculated by a conventional, least-squares optimization analysis. The ability of the neural network to accurately and efficiently control actuator activation for interior noise reduction is demonstrated.

Manifold-Based Image Understanding

DTIC Science & Technology

2010-06-30

3] employs a Texas Instruments digital micromirror device (DMD), which consists of an array of N electrostatically actuated micromirrors . The camera...image x) is reflected off a digital micromirror device (DMD) array whose mirror orientations are modulated in the pseudorandom pattern φm supplied by a

Reconfigurable Array Antenna Using Microelectromechanical Systems (MEMS) Actuators

NASA Technical Reports Server (NTRS)

Simons, Rainee N.; Chun, Donghoon; Katehi, Linda P. B.

2001-01-01

The paper demonstrates a patch antenna integrated with a novel microelectromechanical systems (MEMS) actuator for reconfiguring the operating frequency. Experimental results demonstrate that the center frequency can be reconfigured by as much as 1.6 percent of the nominal operating frequency at K-Band In addition, a novel on-wafer antenna pattern measurement technique is demonstrated.

Achieving Superior Two-Way Actuation by the Stress-Coupling of Nanoribbons and Nanocrystalline Shape Memory Alloy

DOE Office of Scientific and Technical Information (OSTI.GOV)

Hao, Shijie; Liu, Yinong; Ren, Yang

2016-06-08

Inspired by the driving principle of traditional bias-type two-way actuators, we developed a novel two-way actuation nanocomposite wire in which a massive number of Nb nanoribbons with ultra-large elastic strains are loaded inside a shape memory alloy (SMA) matrix to form a continuous array of nano bias actuation pairs for two-way actuation. The composite exhibits a two-way actuation strain of 3.2% during a thermal cycle and an actuation stress of 934 MPa upon heating, which is about twice higher than that (~500 MPa) found in reported two-way SMAs. Upon cooling, the composite shows an actuation stress of 134 MPa andmore » a mechanical work output of 1.08*106 J/ m3, which are about three and five times higher than that of reported two-way SMAs, respectively. It is revealed that the massive number of Nb nanoribbons in compressive state provides the high actuation stress and high work output upon cooling and the SMA matrix with high yield strength offers the high actuation stress upon heating. Compared to traditional bias-type two-way actuators, the two-way actuation composite with small volume and simple construct is in favour of the miniaturization and simplification of actuators.« less

Aligning Optical Fibers by Means of Actuated MEMS Wedges

NASA Technical Reports Server (NTRS)

Morgan, Brian; Ghodssi, Reza

2007-01-01

Microelectromechanical systems (MEMS) of a proposed type would be designed and fabricated to effect lateral and vertical alignment of optical fibers with respect to optical, electro-optical, optoelectronic, and/or photonic devices on integrated circuit chips and similar monolithic device structures. A MEMS device of this type would consist of a pair of oppositely sloped alignment wedges attached to linear actuators that would translate the wedges in the plane of a substrate, causing an optical fiber in contact with the sloping wedge surfaces to undergo various displacements parallel and perpendicular to the plane. In making it possible to accurately align optical fibers individually during the packaging stages of fabrication of the affected devices, this MEMS device would also make it possible to relax tolerances in other stages of fabrication, thereby potentially reducing costs and increasing yields. In a typical system according to the proposal (see Figure 1), one or more pair(s) of alignment wedges would be positioned to create a V groove in which an optical fiber would rest. The fiber would be clamped at a suitable distance from the wedges to create a cantilever with a slight bend to push the free end of the fiber gently to the bottom of the V groove. The wedges would be translated in the substrate plane by amounts Dx1 and Dx2, respectively, which would be chosen to move the fiber parallel to the plane by a desired amount Dx and perpendicular to the plane by a desired amount Dy. The actuators used to translate the wedges could be variants of electrostatic or thermal actuators that are common in MEMS.

Low Voltage MEMS Digital Loudspeaker Array Based on Thin-film PZT Actuators

NASA Astrophysics Data System (ADS)

Fanget, S.; Casset, F.; Dejaeger, R.; Maire, F.; Desloges, B.; Deutzer, J.; Morisson, R.; Bohard, Y.; Laroche, B.; Escato, J.; Leclere, Q.

This paper reports on the development of a Digital Loudspeaker Array (DLA) solution based on Pb(Zr0.52,Ti0.48)O3 (PZT) thin-film actuated membranes. These membranes called speaklets are arranged in a matrix and operate in a binary manner by emitting short pulses of sound pressure. Using the principle of additivity of pressures in the air, it is possible to reconstruct audible sounds. For the first time, electromechanical and acoustic characterizations are reported on a 256-MEMS-membranes DLA. Sounds audible as far as several meters from the loudspeaker have been generated using low voltage (8 V).

Shear sensing in bonded composites with cantilever beam microsensors and dual-plane digital image correlation

NASA Astrophysics Data System (ADS)

Baur, Jeffery W.; Slinker, Keith; Kondash, Corey

2017-04-01

Understanding the shear strain, viscoelastic response, and onset of damage within bonded composites is critical to their design, processing, and reliability. This presentation will discuss the multidisciplinary research conducted which led to the conception, development, and demonstration of two methods for measuring the shear within a bonded joint - dualplane digital image correlation (DIC) and a micro-cantilever shear sensor. The dual plane DIC method was developed to measure the strain field on opposing sides of a transparent single-lap joint in order to spatially quantify the joint shear strain. The sensor consists of a single glass fiber cantilever beam with a radially-grown forest of carbon nanotubes (CNTs) within a capillary pore. When the fiber is deflected, the internal radial CNT array is compressed against an electrode within the pore and the corresponding decrease in electrical resistance is correlated with the external loading. When this small, simple, and low-cost sensor was integrated within a composite bonded joint and cycled in tension, the onset of damage prior to joint failure was observed. In a second sample configuration, both the dual plane DIC and the hair sensor detected viscoplastic changes in the strain of the sample in response to continued loading.

Enhanced Quality Factor Label-free Biosensing with Micro-Cantilevers Integrated into Microfluidic Systems.

PubMed

Kartanas, Tadas; Ostanin, Victor; Challa, Pavan Kumar; Daly, Ronan; Charmet, Jerome; Knowles, Tuomas P J

2017-11-21

Microelectromechanical systems (MEMS) have enabled the development of a new generation of sensor platforms. Acoustic sensor operation in liquid, the native environment of biomolecules, causes, however, significant degradation of sensing performance due to viscous drag and relies on the availability of capture molecules to bind analytes of interest to the sensor surface. Here, we describe a strategy to interface MEMS sensors with microfluidic platforms through an aerosol spray. Our sensing platform comprises a microfluidic spray nozzle and a microcantilever array operated in dynamic mode within a closed loop oscillator. A solution containing the analyte is sprayed uniformly through picoliter droplets onto the microcantilever surface; the micrometer-scale drops evaporate rapidly and leave the solutes behind, adding to the mass of the cantilever. This sensing scheme results in a 50-fold increase in the quality factor compared to operation in liquid, yet allows the analytes to be introduced into the sensing system from a solution phase. It achieves a 370 femtogram limit of detection, and we demonstrate quantitative label-free analysis of inorganic salts and model proteins. These results demonstrate that the standard resolution limits of cantilever sensing in dynamic mode can be overcome with the integration of spray microfluidics with MEMS.

Remotely adjustable check-valves with an electrochemical release mechanism for implantable biomedical microsystems.

PubMed

Pan, Tingrui; Baldi, Antonio; Ziaie, Babak

2007-06-01

In this paper, we present two remotely adjustable check-valves with an electrochemical release mechanism for implantable biomedical microsystems. These valves allow one to vary the opening pressure set-point and flow resistance over a period of time. The first design consists of a micromachined check-valve array using a SU-8 polymer structural layer deposited on the top of a gold sacrificial layer. The second design is based on a variable length cantilever beam structure with a gold sacrificial layer. The adjustable cantilever-beam structure is fabricated by gold thermo-compression bond of a thin silicon wafer over a glass substrate. In both designs, the evaporated gold can be electrochemically dissolved using a constant DC current via a telemetry link. In the first design the dissolution simply opens up individual outlets, while in the second design, gold anchors are sequentially dissolved hence increasing the effective length of the cantilever beam (reducing the opening pressure). A current density of 35 mA/cm(2) is used to dissolve the gold sacrificial layers. Both gravity and syringe-pump driven flow are used to characterize the valve performance. A multi-stage fluidic performance (e.g. flow resistance and opening pressure) is clearly demonstrated.

Experimental investigation on a vectorized aerodynamic dielectric barrier discharge plasma actuator array

NASA Astrophysics Data System (ADS)

Neretti, Gabriele; Cristofolini, Andrea; Borghi, Carlo A.

2014-04-01

The Electro-Hydro-Dynamics (EHD) interaction, induced in atmospheric pressure still air by a surface dielectric barrier discharge (DBD) actuator, had been experimentally studied. A plasma aerodynamic actuator array, able to produce a vectorized jet, with the induced airflow oriented toward the desired direction, had been developed. The array was constituted by a sequence of single surface DBD actuators with kapton as dielectric material. An ac voltage in the range of 0-6 kV peak at 15 kHz had been used. The vectorization had been obtained by feeding the upper electrodes with different voltages and by varying the electrical connections. The lower electrodes had been connected either to ground or to the high voltage source, to produce the desired jet orientation and to avoid plasma formation acting in an undesired direction. Voltage and current measurements had been carried out to evaluate waveforms and to estimate the active power delivered to the discharge. Schlieren imaging allowed to visualize the induced jet and to estimate its orientation. Pitot measurements had been performed to obtain velocity profiles for all jet configurations. A proportional relation between the jet deflection angle and the applied voltage had been found. Moreover, a linear relation had been obtained between the maximum speed in the jet direction and the applied voltage. The active power of the discharge is approximated by both a power law function and an exponential function of the applied voltage.

Double-Mode Miniature Cantilever-Type Ultrasonic Motor Using Lead-Free Array-Type Multilayer Piezoelectric Ceramics

NASA Astrophysics Data System (ADS)

Doshida, Yutaka; Kishimoto, Sumiaki; Irieda, Taisei; Tamura, Hideki; Tomikawa, Yoshiro; Hirose, Seiji

2008-05-01

We studied the following to improve the characteristics of the lead-free ultrasonic micromotor. A double-mode miniature cantilever-type ultrasonic motor was fabricated using array-type multilayer piezoelectric ceramics (A-MLPC) of (Sr,Ca)2NaNb5O15 (SCNN) such as lead-free piezoelectric materials, and the electrical driving properties were investigated. The A-MLPC integrated multilayer piezoelectric ceramics (MLPC) arrayed in a 2 ×2 matrix. By using A-MLPC, double-mode bending vibration of the stator vibrator can be realized easily, and the quality factor of the vibrator increased. Furthermore, with the improvement of the piezoelectric properties of the SCNN, the electromechanical coupling coefficient of the vibrator increased. As a result, we succeeded in improving the driving properties of the motor. In particular, the driving voltage of SCNN motor decreased to 1/10 of the previous study, and this motor is similar to Pb(Zr,Ti)O3-Pb(Ni,Nb)O3-Pb(Zn,Nb)O3 (PZT) one in terms of properties by applying 3 times higher voltage than that required for the PZT one. The SCNN motor started to rotate at 0.3 Vp-p and showed such characteristics as revolution speed of 730 rpm, torque of 0.7 µN m, and efficiency of 3.5% at 1.6 Vp-p. It appeared that the SCNN motor was able to rotate by a lithium-ion cell used in the mobile equipment without an amplifier circuit.

Sensing of fluid viscoelasticity from piezoelectric actuation of cantilever flexural vibration

DOE Office of Scientific and Technical Information (OSTI.GOV)

Park, Jeongwon; Jeong, Seongbin; Kim, Seung Joon

2015-01-15

An experimental method is proposed to measure the rheological properties of fluids. The effects of fluids on the vibration actuated by piezoelectric patches were analyzed and used in measuring viscoelastic properties. Fluid-structure interactions induced changes in the beam vibration properties and frequency-dependent variations of the complex wavenumber of the beam structure were used in monitoring these changes. To account for the effects of fluid-structure interaction, fluids were modelled as a simple viscoelastic support at one end of the beam. The measured properties were the fluid’s dynamic shear modulus and loss tangent. Using the proposed method, the rheological properties of variousmore » non-Newtonian fluids were measured. The frequency range for which reliable viscoelasticity results could be obtained was 10–400 Hz. Viscosity standard fluids were tested to verify the accuracy of the proposed method, and the results agreed well with the manufacturer’s reported values. The simple proposed laboratory setup for measurements was flexible so that the frequency ranges of data acquisition were adjustable by changing the beam’s mechanical properties.« less

PACS—Realization of an adaptive concept using pressure actuated cellular structures

NASA Astrophysics Data System (ADS)

Gramüller, B.; Boblenz, J.; Hühne, C.

2014-10-01

A biologically inspired concept is investigated which can be utilized to develop energy efficient, lightweight and applicational flexible adaptive structures. Building a real life morphing unit is an ambitious task as the numerous works in the particular field show. Summarizing fundamental demands and barriers regarding shape changing structures, the basic challenges of designing morphing structures are listed. The concept of Pressure Actuated Cellular Structures (PACS) is arranged within the recent morphing activities and it is shown that it complies with the underlying demands. Systematically divided into energy-related and structural subcomponents the working principle is illuminated and relationships between basic design parameters are expressed. The analytical background describing the physical mechanisms of PACS is presented in concentrated manner. This work focuses on the procedure of dimensioning, realizing and experimental testing of a single cell and a single row cantilever made of PACS. The experimental outcomes as well as the results from the FEM computations are used for evaluating the analytical methods. The functionality of the basic principle is thus validated and open issues are determined pointing the way ahead.

Design and testing of a novel piezoelectric micro-motor actuated by asymmetrical inertial impact driving principle.

PubMed

Zeng, Ping; Sun, Shujie; Li, Li'an; Xu, Feng; Cheng, Guangming

2014-03-01

In this paper, an asymmetrical inertial impact driving principle is first proposed, and accordingly a novel piezoelectrically actuated linear micro-motor is developed. It is driven by the inertial impact force generated by piezoelectric smart cantilever (PSC) with asymmetrical clamping locations during a driving cycle. When the PSC is excited by typical harmonic voltage signals, different equivalent stiffness will be induced due to its asymmetrical clamping locations when it is vibrating back and forth, leading to a tiny displacement difference on the two opposite directions in a cycle, and then the accumulation of tiny displacement difference will allow directional movements. A prototype of the proposed motor has been developed and investigated by means of experimental tests. The motion and dynamics characteristics of the prototype are well studied. The experimental results demonstrate that the resolution of the micro-motor is 0.02 μm, the maximum velocity is 16.87 mm/s, and the maximum loading capacity can reach up to 1 kg with a voltage of 100 V and 35 Hz.

High precision innovative micropump for artificial pancreas

NASA Astrophysics Data System (ADS)

Chappel, E.; Mefti, S.; Lettieri, G.-L.; Proennecke, S.; Conan, C.

2014-03-01

The concept of artificial pancreas, which comprises an insulin pump, a continuous glucose meter and a control algorithm, is a major step forward in managing patient with type 1 diabetes mellitus. The stability of the control algorithm is based on short-term precision micropump to deliver rapid-acting insulin and to specific integrated sensors able to monitor any failure leading to a loss of accuracy. Debiotech's MEMS micropump, based on the membrane pump principle, is made of a stack of 3 silicon wafers. The pumping chamber comprises a pillar check-valve at the inlet, a pumping membrane which is actuated against stop limiters by a piezo cantilever, an anti-free-flow outlet valve and a pressure sensor. The micropump inlet is tightly connected to the insulin reservoir while the outlet is in direct communication with the patient skin via a cannula. To meet the requirement of a pump dedicated to closed-loop application for diabetes care, in addition to the well-controlled displacement of the pumping membrane, the high precision of the micropump is based on specific actuation profiles that balance effect of pump elasticity in low-consumption push-pull mode.

Mechanical Behavior of Microelectromechanical Microshutters

NASA Technical Reports Server (NTRS)

Burns, Devin Edward; Jones, Justin Scott; Li, Mary J.

2014-01-01

A custom micro-mechanical test system was constructed using off-the-shelf components to characterize the mechanical properties of microshutters. Microshutters are rectangular microelectromechanical apertures which open and close about a narrow torsion bar hinge. Displacement measurements were verified using both capacitive and digital image correlation techniques. Repeatable experiments on Si3N4 cantilever beams verified that the test system operates consistently. Using beam theory, the modulus of elasticity of the low stress Si3N4 was approximately 150 GPa, though significant uncertainty exists for this measurement due primarily to imprecise knowledge of the cantilever thickness. Tests conducted on microshutter arrays concluded that reducing the Si3N4 thickness from 250 nm to 500 nm reduces the torsional stiffness by a factor of approximately four. This is in good agreement with analytical and finite element models of the microshutters.

Distributed Actuation and Sensing on an Uninhabited Aerial Vehicle

NASA Technical Reports Server (NTRS)

Barnwell, William Garrard

2003-01-01

An array of effectors and sensors has been designed, tested and implemented on a Blended Wing Body Uninhabited Aerial Vehicle (UAV). The UAV is modified to serve as a flying, controls research, testbed. This effector/sensor array provides for the dynamic vehicle testing of controller designs and the study of decentralized control techniques. Each wing of the UAV is equipped with 12 distributed effectors that comprise a segmented array of independently actuated, contoured control surfaces. A single pressure sensor is installed near the base of each effector to provide a measure of deflections of the effectors. The UAV wings were tested in the North Carolina State University Subsonic Wind Tunnel and the pressure distribution that result from the deflections of the effectors are characterized. The results of the experiments are used to develop a simple, but accurate, prediction method, such that for any arrangement of the effector array the corresponding pressure distribution can be determined. Numerical analysis using the panel code CMARC verifies this prediction method.

UAV Flight Control Using Distributed Actuation and Sensing

NASA Technical Reports Server (NTRS)

Barnwell, William G.; Heinzen, Stearns N.; Hall, Charles E., Jr.; Chokani, Ndaona; Raney, David L. (Technical Monitor)

2003-01-01

An array of effectors and sensors has been designed, tested and implemented on a Blended Wing Body Uninhabited Aerial Vehicle (UAV). This UAV is modified to serve as a flying, controls research, testbed. This effectorhensor array provides for the dynamic vehicle testing of controller designs and the study of decentralized control techniques. Each wing of the UAV is equipped with 12 distributed effectors that comprise a segmented array of independently actuated, contoured control surfaces. A single pressure sensor is installed near the base of each effector to provide a measure of deflections of the effectors. The UAV wings were tested in the North Carolina State University Subsonic Wind Tunnel and the pressure distribution that result from the deflections of the effectors are characterized. The results of the experiments are used to develop a simple, but accurate, prediction method, such that for any arrangement of the effector array the corresponding pressure distribution can be determined. Numerical analysis using the panel code CMARC verifies this prediction method.

High efficiency β radioisotope energy conversion using reciprocating electromechanical converters with integrated betavoltaics

NASA Astrophysics Data System (ADS)

Duggirala, Rajesh; Li, Hui; Lal, Amit

2008-04-01

We demonstrate a 5.1% energy conversion efficiency Ni63 radioisotope power generator by integrating silicon betavoltaic converters with radioisotope actuated reciprocating piezoelectric unimorph cantilever converters. The electromechanical energy converter efficiently utilizes both the kinetic energy and the electrical charge of the 0.94μW β radiation from a 9mCi Ni63 thin film source to generate maximum (1) continuous betavoltaic electrical power output of 22nW and (2) pulsed piezoelectric electrical power output of 750μW at 0.07% duty cycle. The electromechanical converters can be potentially used to realize 100year lifetime power sources for powering periodic sampling remote wireless sensor microsystems.

Inverse problems in the modeling of vibrations of flexible beams

NASA Technical Reports Server (NTRS)

Banks, H. T.; Powers, R. K.; Rosen, I. G.

1987-01-01

The formulation and solution of inverse problems for the estimation of parameters which describe damping and other dynamic properties in distributed models for the vibration of flexible structures is considered. Motivated by a slewing beam experiment, the identification of a nonlinear velocity dependent term which models air drag damping in the Euler-Bernoulli equation is investigated. Galerkin techniques are used to generate finite dimensional approximations. Convergence estimates and numerical results are given. The modeling of, and related inverse problems for the dynamics of a high pressure hose line feeding a gas thruster actuator at the tip of a cantilevered beam are then considered. Approximation and convergence are discussed and numerical results involving experimental data are presented.

Large micromirror array for multi-object spectroscopy in space

NASA Astrophysics Data System (ADS)

Canonica, Michael; Zamkotsian, Frédéric; Lanzoni, Patrick; Noell, Wilfried

2017-11-01

Multi-object spectroscopy (MOS) is a powerful tool for space and ground-based telescopes for the study of the formation and evolution of galaxies. This technique requires a programmable slit mask for astronomical object selection. We are engaged in a European development of micromirror arrays (MMA) for generating reflective slit masks in future MOS, called MIRA. The 100 x 200 μm2 micromirrors are electrostatically tilted providing a precise angle. The main requirements are cryogenic environment capabilities, precise and uniform tilt angle over the whole device, uniformity of the mirror voltage-tilt hysteresis and a low mirror deformation. A first MMA with single-crystal silicon micromirrors was successfully designed, fabricated and tested. A new generation of micromirror arrays composed of 2048 micromirrors (32 x 64) and modelled for individual addressing were fabricated using fusion and eutectic wafer-level bonding. These micromirrors without coating show a peak-to-valley deformation less than 10 nm, a tilt angle of 24° for an actuation voltage of 130 V. Individual addressing capability of each mirror has been demonstrated using a line-column algorithm based on an optimized voltage-tilt hysteresis. Devices are currently packaged, wire-bonded and integrated to a dedicated electronics to demonstrate the individual actuation of all micromirrors on an array. An operational test of this large array with gold coated mirrors has been done at cryogenic temperature (162 K): the micromirrors were actuated successfully before, during and after the cryogenic experiment. The micromirror surface deformation was measured at cryo and is below 30 nm peak-to-valley.

Implementation of heaters on thermally actuated spacecraft mechanisms

NASA Technical Reports Server (NTRS)

Busch, John D.; Bokaie, Michael D.

1994-01-01

This paper presents general insight into the design and implementation of heaters as used in actuating mechanisms for spacecraft. Problems and considerations that were encountered during development of the Deep Space Probe and Science Experiment (DSPSE) solar array release mechanism are discussed. Obstacles included large expected fluctuations in ambient temperature, variations in voltage supply levels outgassing concerns, heater circuit design, materials selection, and power control options. Successful resolution of these issues helped to establish a methodology which can be applied to many of the heater design challenges found in thermally actuated mechanisms.

A Reconfigurable Pneumatic Bending Actuator with Replaceable Inflation Modules.

PubMed

Natividad, Rainier; Del Rosario, Manuel; Chen, Peter C Y; Yeow, Chen-Hua

2018-06-01

A fully reconfigurable, pneumatic bending actuator is fabricated by implementing the concept of modularity to soft robotics. The actuator features independent, removable, fabric inflation modules that are attached to a common flexible but non-inflating plastic spine. The fabric modules are individually fabricated by heat sealing a thermoplastic polyurethane-coated nylon fabric, whereas the spine is manufactured through fused deposition modeling 3D printing; the components can be assembled and dismantled without the aid of any external tools. The replacement of specific modules along the array facilitates the reconfiguration of the actuator's bending trajectory and torque output; likewise, the combination of inflation modules with dissimilar geometries translates to several different trajectories on a single spine and allows the actuator to bend into assorted, unique structures. A detailed description of the actuator's design is thoroughly presented. We explored how reconfiguration of the actuator's modular geometry affected both the steady state and the dynamic characteristics of the actuator. The torque output of the actuator is proportional to the magnitude of the pressure applied. The actuator was excited by sinusoidal and square pressure inputs, and a second-order linear fit was performed. There were no perceived changes in its performance even after 100,000 inflation and deflation cycles.

Actuation mechanisms of carbon nanotube-based architectures

NASA Astrophysics Data System (ADS)

Geier, Sebastian; Mahrholz, Thorsten; Wierach, Peter; Sinapius, Michael

2016-04-01

State of the art smart materials such as piezo ceramics or electroactive polymers cannot feature both, mechanical stiffness and high active strain. Moreover, properties like low density, high mechanical stiffness and high strain at the same time driven by low energy play an increasingly important role for their future application. Carbon nanotubes (CNT), show this behavior. Their active behavior was observed 1999 the first time using paper-like mats made of CNT. Therefore the CNT-papers are electrical charged within an electrolyte thus forming a double- layer. The measured deflection of CNT material is based on the interaction between the charged high surface area formed by carbon nanotubes and ions provided by the electrolyte. Although CNT-papers have been extensively analyzed as well at the macro-scale as nano-scale there is still no generally accepted theory for the actuation mechanism. This paper focuses on investigations of the actuation mechanisms of CNT-papers in comparison to vertically aligned CNT-arrays. One reason of divergent results found in literature might be attributed to different types of CNT samples. While CNT-papers represent architectures of short CNTs which need to bridge each other to form the dimensions of the sample, the continuous CNTs of the array feature a length of almost 3 mm, along which the experiments are carried out. Both sample types are tested within an actuated tensile test set-up under different conditions. While the CNT-papers are tested in water-based electrolytes with comparably small redox-windows the hydrophobic CNT-arrays are tested in ionic liquids with comparatively larger redox-ranges. Furthermore an in-situ micro tensile test within an SEM is carried out to prove the optimized orientation of the MWCNTs as result of external load. It was found that the performance of CNT-papers strongly depends on the test conditions. However, the CNT-arrays are almost unaffected by the conditions showing active response at negative and positive voltages. A micro alignment as result of tensile stress can be proven. A comparison of both results point out that the actuation mechanism strongly depends on the weakest bonds of the architectures: Van-der-Waals-bonds vs. covalent C-bonds.

Hybrid Electrostatic/Flextensional Mirror for Lightweight, Large-Aperture, and Cryogenic Space Telescopes

NASA Technical Reports Server (NTRS)

Patrick, Brian; Moore, James; Hackenberger, Wesley; Jiang, Xiaoning

2013-01-01

A lightweight, cryogenically capable, scalable, deformable mirror has been developed for space telescopes. This innovation makes use of polymer-based membrane mirror technology to enable large-aperture mirrors that can be easily launched and deployed. The key component of this innovation is a lightweight, large-stroke, cryogenic actuator array that combines the high degree of mirror figure control needed with a large actuator influence function. The latter aspect of the innovation allows membrane mirror figure correction with a relatively low actuator density, preserving the lightweight attributes of the system. The principal components of this technology are lightweight, low-profile, high-stroke, cryogenic-capable piezoelectric actuators based on PMN-PT (piezoelectric lead magnesium niobate-lead titanate) single-crystal configured in a flextensional actuator format; high-quality, low-thermal-expansion polymer membrane mirror materials developed by NeXolve; and electrostatic coupling between the membrane mirror and the piezoelectric actuator assembly to minimize problems such as actuator print-through.

Design and Performance of AN Electrostrictive-Polymer Acoustic Actuator

NASA Astrophysics Data System (ADS)

Heydt, R.; Kornbluh, R.; Pelrine, R.; Mason, V.

1998-08-01

This paper discusses a novel electroacoustic transducer that uses the electrostrictive response of a polymer film. The active element of the transducer is a thin silicone-rubber film, with graphite powder electrodes on each side, that forms an array of bubble-like radiating elements. In experiments, radiated acoustic pressure and harmonic distortion of the electrostrictive-film actuator were measured in the frequency band 50-2000 Hz. A simple acoustic model was also developed to study the effect of various design and operating parameters on the actuator performance. Preliminary results from the experiments and simulations show that the electrostrictive-polymer-film actuator has the potential to be an efficient, compact, and lightweight electroacoustic transducer.

Non-explosive actuation for the ORBCOMM (TM) satellite

NASA Technical Reports Server (NTRS)

Robinson, Anthony; Courtney, Craig; Moran, Tom

1995-01-01

Spool-based non-explosive actuator (NEA) devices are used for three important holddown and release functions during the establishment of the ORBCOMM (TM) constellation. Non-explosive separation nuts are used to restrain and release the 26 individual satellites into low earth orbit. Cable release mechanisms based on the same technology are used to release the solar arrays and antenna boom.

Fabrication of close-packed TES microcalorimeter arrays using superconducting molybdenum/gold transition-edge sensors

NASA Astrophysics Data System (ADS)

Finkbeiner, F. M.; Brekosky, R. P.; Chervenak, J. A.; Figueroa-Feliciano, E.; Li, M. J.; Lindeman, M. A.; Stahle, C. K.; Stahle, C. M.; Tralshawala, N.

2002-02-01

We present an overview of our efforts in fabricating Transition-Edge Sensor (TES) microcalorimeter arrays for use in astronomical x-ray spectroscopy. Two distinct types of array schemes are currently pursued: 5×5 single pixel TES array where each pixel is a TES microcalorimeter, and Position-Sensing TES (PoST) array. In the latter, a row of 7 or 15 thermally-linked absorber pixels is read out by two TES at its ends. Both schemes employ superconducting Mo/Au bilayers as the TES. The TES are placed on silicon nitride membranes for thermal isolation from the structural frame. The silicon nitride membranes are prepared by a Deep Reactive Ion Etch (DRIE) process into a silicon wafer. In order to achieve the concept of closely packed arrays without decreasing its structural and functional integrity, we have already developed the technology to fabricate arrays of cantilevered pixel-sized absorbers and slit membranes in silicon nitride films. Furthermore, we have started to investigate ultra-low resistance through-wafer micro-vias to bring the electrical contact out to the back of a wafer. .

Generation of miniaturized planar ecombinant antibody arrays using a microcantilever-based printer

NASA Astrophysics Data System (ADS)

Petersson, Linn; Berthet Duroure, Nathalie; Auger, Angèle; Dexlin-Mellby, Linda; Borrebaeck, Carl AK; Ait Ikhlef, Ali; Wingren, Christer

2014-07-01

Miniaturized (Ø 10 μm), multiplexed (>5-plex), and high-density (>100 000 spots cm-2) antibody arrays will play a key role in generating protein expression profiles in health and disease. However, producing such antibody arrays is challenging, and it is the type and range of available spotters which set the stage. This pilot study explored the use of a novel microspotting tool, BioplumeTM—consisting of an array of micromachined silicon cantilevers with integrated microfluidic channels—to produce miniaturized, multiplexed, and high-density planar recombinant antibody arrays for protein expression profiling which targets crude, directly labelled serum. The results demonstrated that 16-plex recombinant antibody arrays could be produced—based on miniaturized spot features (78.5 um2, Ø 10 μm) at a 7-125-times increased spot density (250 000 spots cm-2), interfaced with a fluorescent-based read-out. This prototype platform was found to display adequate reproducibility (spot-to-spot) and an assay sensitivity in the pM range. The feasibility of the array platform for serum protein profiling was outlined.

Properties of piezoresistive silicon nano-scale cantilevers with applications to BioNEMS

NASA Astrophysics Data System (ADS)

Arlett, Jessica Lynn

Over the last decade a great deal of interest has been raised in applications of Microelectromechanical Sensors [MEMS] for the detection of biological molecules and to the study of their forces of interaction. Experiments in these areas have included Force Spectroscopy (Chemical Force Microscopy), MEMS patch clamp technology, and surface stress sensors. All of these technologies suffer from limitations on temporal response and involve devices with active surface areas that are large compared to molecular dimensions. Biofunctionalized nanoelectromechanical systems (BioNEMS) have the potential to overcome both of these hurdles, offering important new prospects for single-molecule force assays that are amenable to large scale integration. Results are presented here on the characterization of piezoresistive silicon cantilevers with applications to BioNEMS devices. The cantilevers were characterized by studying their response in gaseous ambients under a number of drive conditions including magnetic, piezoelectric, and thermal actuation, in addition to passive detection of the thermomechanical response. The measurements were performed at liquid helium temperature, at room temperature, and over a range of pressures (atmospheric pressure to 30mT). Theoretical studies have been performed on the response of these devices to Brownian fluctuations in fluid, on the feasibility of these devices as surface stress sensors, and on improvements in device design as compared to piezoresistive surface stress sensors currently discussed in the literature. The devices were encapsulated in microfluidics and measurements were performed to show the noise floor in fluid. The piezoresistive response of the device in fluid was shown through the use of pulsatory fluidic drive. As a proof of concept, biodetection experiments are presented for biotin labeled beads. The biofunctionalization for the latter experiment was performed entirely within the microfluidics. A discussion of how these experiments can be extended to other cells, spores, and molecules is presented.

Sensor-integrated polymer actuators for closed-loop drug delivery system

NASA Astrophysics Data System (ADS)

Xu, Han; Wang, Chunlei; Kulinsky, Lawrence; Zoval, Jim; Madou, Marc

2006-03-01

This work presents manufacturing and testing of a closed-loop drug delivery system where drug release is achieved by an electrochemical actuation of an array of polymeric valves on a set of drug reservoirs. The valves are based on bi-layer structures made of polypyrrole/gold in the shape of a flap that is hinged on one side of a valve seat. Drugs stored in the underlying chambers are released by bending the bi-layer flaps back with a small applied bias. These polymeric valves simultaneously function as both drug release components and biological/chemical sensors responding to a specific biological or environmental stimulus. The sensors may send signals to the control module to realize closed-loop control of the drug release. In this study a glucose sensor has been integrated with the polymeric actuators through immobilization of glucose oxidase(GOx) within polypyrrole(PPy) valves. Sensitivities per unit area of the integrated glucose sensor have been measured and compared before and after the actuation of the sensor/actuator PPy/DBS/GOx film. Other sensing parameters such as linear range and response time were discussed as well. Using an array of these sensor/actuator cells, the amount of released drug, e.g. insulin, can be precisely controlled according to the surrounding glucose concentration detected by the glucose sensor. Activation of these reservoirs can be triggered either by the signal from the sensor, or by the signal from the operator. This approach also serves as the initial step to use the proposed system as an implantable drug delivery platform in the future.

Design and implementation of digital controllers for smart structures using field-programmable gate arrays

NASA Astrophysics Data System (ADS)

Kelly, Jamie S.; Bowman, Hiroshi C.; Rao, Vittal S.; Pottinger, Hardy J.

1997-06-01

Implementation issues represent an unfamiliar challenge to most control engineers, and many techniques for controller design ignore these issues outright. Consequently, the design of controllers for smart structural systems usually proceeds without regard for their eventual implementation, thus resulting either in serious performance degradation or in hardware requirements that squander power, complicate integration, and drive up cost. The level of integration assumed by the Smart Patch further exacerbates these difficulties, and any design inefficiency may render the realization of a single-package sensor-controller-actuator system infeasible. The goal of this research is to automate the controller implementation process and to relieve the design engineer of implementation concerns like quantization, computational efficiency, and device selection. We specifically target Field Programmable Gate Arrays (FPGAs) as our hardware platform because these devices are highly flexible, power efficient, and reprogrammable. The current study develops an automated implementation sequence that minimizes hardware requirements while maintaining controller performance. Beginning with a state space representation of the controller, the sequence automatically generates a configuration bitstream for a suitable FPGA implementation. MATLAB functions optimize and simulate the control algorithm before translating it into the VHSIC hardware description language. These functions improve power efficiency and simplify integration in the final implementation by performing a linear transformation that renders the controller computationally friendly. The transformation favors sparse matrices in order to reduce multiply operations and the hardware necessary to support them; simultaneously, the remaining matrix elements take on values that minimize limit cycles and parameter sensitivity. The proposed controller design methodology is implemented on a simple cantilever beam test structure using FPGA hardware. The experimental closed loop response is compared with that of an automated FPGA controller implementation. Finally, we explore the integration of FPGA based controllers into a multi-chip module, which we believe represents the next step towards the realization of the Smart Patch.

Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly

PubMed Central

Yang, Zhan; Wang, Yaqiong; Yang, Bin; Li, Guanghui; Chen, Tao; Nakajima, Masahiro; Sun, Lining; Fukuda, Toshio

2016-01-01

Carbon nanotubes (CNT) have been developed in recent decades for nanodevices such as nanoradios, nanogenerators, carbon nanotube field effect transistors (CNTFETs) and so on, indicating that the application of CNTs for nanoscale electronics may play a key role in the development of nanotechnology. Nanorobotics manipulation systems are a promising method for nanodevice construction and assembly. For the purpose of constructing three-dimensional CNTFETs, a nanorobotics manipulation system with 16 DOFs was developed for nanomanipulation of nanometer-scale objects inside the specimen chamber of a scanning electron microscope (SEM). Nanorobotics manipulators are assembled into four units with four DOFs (X-Y-Z-θ) individually. The rotational one is actuated by a picomotor. That means a manipulator has four DOFs including three linear motions in the X, Y, Z directions and a 360-degree rotational one (X-Y-Z-θ stage, θ is along the direction rotating with X or Y axis). Manipulators are actuated by picomotors with better than 30 nm linear resolution and <1 micro-rad rotary resolution. Four vertically installed AFM cantilevers (the axis of the cantilever tip is vertical to the axis of electronic beam of SEM) served as the end-effectors to facilitate the real-time observation of the operations. A series of kinematic derivations of these four manipulators based on the Denavit-Hartenberg (D-H) notation were established. The common working space of the end-effectors is 2.78 mm by 4.39 mm by 6 mm. The manipulation strategy and vision feedback control for multi-manipulators operating inside the SEM chamber were been discussed. Finally, application of the designed nanorobotics manipulation system by successfully testing of the pickup-and-place manipulation of an individual CNT onto four probes was described. The experimental results have shown that carbon nanotubes can be successfully picked up with this nanorobotics manipulation system. PMID:27649180

Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly.

PubMed

Yang, Zhan; Wang, Yaqiong; Yang, Bin; Li, Guanghui; Chen, Tao; Nakajima, Masahiro; Sun, Lining; Fukuda, Toshio

2016-09-14

Carbon nanotubes (CNT) have been developed in recent decades for nanodevices such as nanoradios, nanogenerators, carbon nanotube field effect transistors (CNTFETs) and so on, indicating that the application of CNTs for nanoscale electronics may play a key role in the development of nanotechnology. Nanorobotics manipulation systems are a promising method for nanodevice construction and assembly. For the purpose of constructing three-dimensional CNTFETs, a nanorobotics manipulation system with 16 DOFs was developed for nanomanipulation of nanometer-scale objects inside the specimen chamber of a scanning electron microscope (SEM). Nanorobotics manipulators are assembled into four units with four DOFs (X-Y-Z-θ) individually. The rotational one is actuated by a picomotor. That means a manipulator has four DOFs including three linear motions in the X, Y, Z directions and a 360-degree rotational one (X-Y-Z-θ stage, θ is along the direction rotating with X or Y axis). Manipulators are actuated by picomotors with better than 30 nm linear resolution and <1 micro-rad rotary resolution. Four vertically installed AFM cantilevers (the axis of the cantilever tip is vertical to the axis of electronic beam of SEM) served as the end-effectors to facilitate the real-time observation of the operations. A series of kinematic derivations of these four manipulators based on the Denavit-Hartenberg (D-H) notation were established. The common working space of the end-effectors is 2.78 mm by 4.39 mm by 6 mm. The manipulation strategy and vision feedback control for multi-manipulators operating inside the SEM chamber were been discussed. Finally, application of the designed nanorobotics manipulation system by successfully testing of the pickup-and-place manipulation of an individual CNT onto four probes was described. The experimental results have shown that carbon nanotubes can be successfully picked up with this nanorobotics manipulation system.

Development of a detachable high speed miniature scanning probe microscope for large area substrates inspection

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sadeghian, Hamed, E-mail: hamed.sadeghianmarnani@tno.nl, E-mail: h.sadeghianmarnani@tudelft.nl; Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft; Herfst, Rodolf

We have developed a high speed, miniature scanning probe microscope (MSPM) integrated with a Positioning Unit (PU) for accurately positioning the MSPM on a large substrate. This combination enables simultaneous, parallel operation of many units on a large sample for high throughput measurements. The size of the MSPM is 19 × 45 × 70 mm{sup 3}. It contains a one-dimensional flexure stage with counter-balanced actuation for vertical scanning with a bandwidth of 50 kHz and a z-travel range of more than 2 μm. This stage is mechanically decoupled from the rest of the MSPM by suspending it on specific dynamicallymore » determined points. The motion of the probe, which is mounted on top of the flexure stage is measured by a very compact optical beam deflection (OBD). Thermal noise spectrum measurements of short cantilevers show a bandwidth of 2 MHz and a noise of less than 15 fm/Hz{sup 1/2}. A fast approach and engagement of the probe to the substrate surface have been achieved by integrating a small stepper actuator and direct monitoring of the cantilever response to the approaching surface. The PU has the same width as the MSPM, 45 mm and can position the MSPM to a pre-chosen position within an area of 275×30 mm{sup 2} to within 100 nm accuracy within a few seconds. During scanning, the MSPM is detached from the PU which is essential to eliminate mechanical vibration and drift from the relatively low-resonance frequency and low-stiffness structure of the PU. Although the specific implementation of the MSPM we describe here has been developed as an atomic force microscope, the general architecture is applicable to any form of SPM. This high speed MSPM is now being used in a parallel SPM architecture for inspection and metrology of large samples such as semiconductor wafers and masks.« less

Extreme-UV scanning wafer and reticle stages

DOEpatents

Williams, Mark E.

2002-01-01

A stage for precise positioning of a chuck in three orthogonal linear axes and in three orthogonal rotation axes that includes first and second subassemblies. The a first subassembly includes (i) a monolithic mirror that supports the chuck wherein the monolithic mirror has at least two polished orthogonal faces for interferometric determination of the X, Y, and .THETA.z positions; (ii) a plurality of electromagnetic actuators that control fine positioning in all six axes and coarse positioning in one axis; (iii) a position sensor for measuring the vertical Z position of the monolithic mirror; and (iv) a Lorentz actuator, that includes magnet array, for effecting motion in the Y axis. The a second subassembly comprising a stepping axis beam over which the first subassembly is suspended, wherein the stepping axis beam includes a drive coil array for the Lorentz actuator. T the stage can also include a cable stage subassembly that is positioned a fixed distance away from the monolithic mirror and/or a mechanical zero reference for the first subassembly.

Ultrasonic wave-based structural health monitoring embedded instrument.

PubMed

Aranguren, G; Monje, P M; Cokonaj, Valerijan; Barrera, Eduardo; Ruiz, Mariano

2013-12-01

Piezoelectric sensors and actuators are the bridge between electronic and mechanical systems in structures. This type of sensor is a key element in the integrity monitoring of aeronautic structures, bridges, pressure vessels, wind turbine blades, and gas pipelines. In this paper, an all-in-one system for Structural Health Monitoring (SHM) based on ultrasonic waves is presented, called Phased Array Monitoring for Enhanced Life Assessment. This integrated instrument is able to generate excitation signals that are sent through piezoelectric actuators, acquire the received signals in the piezoelectric sensors, and carry out signal processing to check the health of structures. To accomplish this task, the instrument uses a piezoelectric phased-array transducer that performs the actuation and sensing of the signals. The flexibility and strength of the instrument allow the user to develop and implement a substantial part of the SHM technique using Lamb waves. The entire system is controlled using configuration software and has been validated through functional, electrical loading, mechanical loading, and thermal loading resistance tests.

Optimization of actuator arrays for aircraft interior noise control

NASA Technical Reports Server (NTRS)

Cabell, R. H.; Lester, H. C.; Mathur, G. P.; Tran, B. N.

1993-01-01

A numerical procedure for grouping actuators in order to reduce the number of degrees of freedom in an active noise control system is evaluated using experimental data. Piezoceramic actuators for reducing aircraft interior noise are arranged into groups using a nonlinear optimization routine and clustering algorithm. An actuator group is created when two or more actuators are driven with the same control input. This procedure is suitable for active control applications where actuators are already mounted on a structure. The feasibility of this technique is demonstrated using measured data from the aft cabin of a Douglas DC-9 fuselage. The measured data include transfer functions between 34 piezoceramic actuators and 29 interior microphones and microphone responses due to the primary noise produced by external speakers. Control inputs for the grouped actuators were calculated so that a cost function, defined as a quadratic pressure term and a penalty term, was a minimum. The measured transfer functions and microphone responses are checked by comparing calculated noise reductions with measured noise reductions for four frequencies. The grouping procedure is then used to determine actuator groups that improve overall interior noise reductions by 5.3 to 15 dB, compared to the baseline experimental configuration.

Electrostatic artificial eyelid actuator as an analog micromirror device

NASA Astrophysics Data System (ADS)

Goodwin, Scott H.; Dausch, David E.; Solomon, Steven L.; Lamvik, Michael K.

2005-05-01

An electrostatic MEMS actuator is described for use as an analog micromirror device (AMD) for high performance, broadband, hardware-in-the-loop (HWIL) scene generation. Current state-of-the-art technology is based on resistively heated pixel arrays. As these arrays drive to the higher scene temperatures required by missile defense scenarios, the power required to drive the large format resistive arrays will ultimately become prohibitive. Existing digital micromirrors (DMD) are, in principle, capable of generating the required scene irradiances, but suffer from limited dynamic range, resolution and flicker effects. An AMD would be free of these limitations, and so represents a viable alternative for high performance UV/VIS/IR scene generation. An electrostatic flexible film actuator technology, developed for use as "artificial eyelid" shutters for focal plane sensors to protect against damaging radiation, is suitable as an AMD for analog control of projection irradiance. In shutter applications, the artificial eyelid actuator contained radius of curvature as low as 25um and operated at high voltage (>200V). Recent testing suggests that these devices are capable of analog operation as reflective microcantilever mirrors appropriate for scene projector systems. In this case, the device would possess larger radius and operate at lower voltages (20-50V). Additionally, frame rates have been measured at greater than 5kHz for continuous operation. The paper will describe the artificial eyelid technology, preliminary measurements of analog test pixels, and design aspects related to application for scene projection systems. We believe this technology will enable AMD projectors with at least 5122 spatial resolution, non-temporally-modulated output, and pixel response times of <1.25ms.

Design of Feedforward Controller to Reduce Force Ripple for Linear Motor using Halbach Magnet Array with T Shape Magnet

NASA Astrophysics Data System (ADS)

Kim, Moojong; Kim, Jinyoung; Lee, Moon G.

Recently, in micro/nano fabrication equipments, linear motors are widely used as an actuator to position workpiece, machining tool and measurement head. To control them faster and more precise, the motor should have high actuating force and small force ripple. High actuating force enable us to more workpiece with high acceleration. Eventually, it may provide higher throughput. Force ripple gives detrimental effect on the precision and tracking performance of the equipments. In order to accomplish more precise motion, it is important to make lower the force ripple. Force ripple is categorized into cogging and mutual ripple. First is dependent on the shape of magnets and/or core. The second is not dependent on them but dependent on current commutation. In this work, coreless mover i.e. coil winding is applied to the linear motor to avoid the cogging ripple. Therefore, the mutual ripple is only considered to be minimized. Ideal Halbach magnet array has continuously varying magnetization. The THMA (Halbach magnet array with T shape magnets) is proposed to approximate the ideal one. The THMA can not produce ideal sinusoidal flux, therefore, the linear motor with THMA and sinusoidal commutation of current generates the mutual force ripple. In this paper, in order to compensate mutual force ripple by feedforward(FF) controller, we calculate the optimized commutation of input current. The ripple is lower than 1.17% of actuating force if the commutation current agree with the magnetic flux from THMA. The performance of feedforward(FF) controller is verified by experiment.

Vibration Suppression Strategies for Large Tension-Aligned Array Structures

DTIC Science & Technology

2013-11-19

show vibration suppression. Practical issues related to actuator bandwidth were also addressed. 40 Dr. Ranjan Mukherjee (517) 355-1834 FINAL...third strategies, Lyapunov stability theory was used to show vibration suppression. Practical issues related to actuator bandwidth were also addressed...1 Publications Journal Papers : • Alsahlani, A. and Mukherjee, R., “Vibration Control of a String Using a Scabbard-Like Actuator”, Journal of Sound and

MEMS-based gradiometer for the complete characterization of Martian magnetic environment

NASA Astrophysics Data System (ADS)

Mesa, Jose Luis; Ciudad, David; McHenry, Michael E.; Aroca, Claudio; Díaz-Michelena, Marina

2013-04-01

The in-situ determination of the Martian magnetic field is one of the most important and ambitious objectives in Mars exploration, because its implications in paleomagnetism, tectonics and mineral determination. To place sensors on Mars is a complicated task, due to the extreme conditions of the planet surface and also because of the relative low budget devoted to this kind of instrument: low power, mass, volume and the need to operate in a magnetically noise environment. A complete and accurate measurement of the magnetic environment includes the determination of both magnitude and gradient of the magnetic field (B). There are many developments of magnetometers with the characteristics mentioned before [2], but the question about gradient is not that well solved and most gradient sensors are based on a couple of magnetometers separated a certain distance [2, 3]. The aim of this abstract is to introduce a new MEMS based robust gradiometer for the point measurement of the field gradient with the ultimate goal to perform in situ measurement on Mars and shed some light in the magnetic anomalies explanation of the Red Planet. Since in some conditions ?ׯB = 0, we assume knowing six of the nine components is sufficient to reconstruct entirely the magnetic field gradient. The device proposed consists of a set of six cantilevers to measure these six components (with resolution in the order of 1 nT/mm) combined either with another miniaturized and more accurate magnetometer (with resolution below the nT) for the measurement of the field vector. Every component system consists of a cantilever with an appropriate geometry, an excitation coil and a mechanism to generate a field gradient. The cantilevers are made of piezoelectric material (bimorph, with two piezoelectric layers) covered by a soft ferromagnetic material (of Iron-Nickel base). Is explained below the working principle for one component. When the excitation system generates an alternating magnetic field (enough to saturate) along the width of the cantilever, the ferromagnetic material is alternatively saturated in both directions along the cantilever's width. Under the presence of a magnetic field gradient in the normal direction to the plane of the cantilever, the ferromagnetic material experiments a force, making the cantilever vibrate. This vibration generates an electric signal, given that when the cantilever vibrates, the piezoelectric layers stretches and contracts, so it sets a voltage difference. The current system with dimensions in the order of mm is run at its resonant frequency. In the presence of an external magnetic field gradient, the vibration frequency changes. The external gradient can be easily measured by means of the measurement of the frequency shift. References: [1] Acuña, M.H.: Space-based magnetometers, Rev. Sci. Instrum., 73, 3717-3736, doi: 10.1063/1.1510570, Nov 2002. [2] Merayo, J.M.G.; Brauer, P.; Primdahl, F.: Triaxial fluxgate gradiometer of high stability and linearity, Sensor Actuat A-Phys., 120, 71-77, doi: 10.1016/j.sna.2004.11.014, Apr 2005. [3] Lucas, I.; Michelena, M.D.;del Real, R.P.; de Manuel, V.; Plaza, J.A. 2; Duch, M.; Esteve, J; Guerrero, H.: A New Single-Sensor Magnetic Field Gradiometer, Sens. Lett., 7, 563-570, doi: 10.1166/sl.2009.1110, Aug 2009.

Thruster array design approaches for a solar electric propulsion Encke Flyby mission

NASA Technical Reports Server (NTRS)

Ross, R. G., Jr.

1973-01-01

Design approaches are described and evaluated for a mercury electron-bombardment ion thruster array. Such an array might be used on a solar electric interplanetary spacecraft that obtains electrical energy from large solar panels. Thruster array designs are described and evaluated as they would apply to an Encke Flyby mission. Besides several well known approaches, a new concept utilizing individual two-axis gimbal actuators on each thruster is described and shown to have many structural and thermal advantages.

Engineering Design Tools for Shape Memory Alloy Actuators: CASMART Collaborative Best Practices and Case Studies

NASA Technical Reports Server (NTRS)

Wheeler, Robert W.; Benafan, Othmane; Gao, Xiujie; Calkins, Frederick T; Ghanbari, Zahra; Hommer, Garrison; Lagoudas, Dimitris; Petersen, Andrew; Pless, Jennifer M.; Stebner, Aaron P.;

Cardiac Muscle-cell Based Actuator and Self-stabilizing Biorobot - PART 1.

PubMed

Holley, Merrel T; Nagarajan, Neerajha; Danielson, Christian; Zorlutuna, Pinar; Park, Kidong

2017-07-11

Biological machines often referred to as biorobots, are living cell- or tissue-based devices that are powered solely by the contractile activity of living components. Due to their inherent advantages, biorobots are gaining interest as alternatives to traditional fully artificial robots. Various studies have focused on harnessing the power of biological actuators, but only recently studies have quantitatively characterized the performance of biorobots and studied their geometry to enhance functionality and efficiency. Here, we demonstrate the development of a self-stabilizing swimming biorobot that can maintain its pitch, depth, and roll without external intervention. The design and fabrication of the PDMS scaffold for the biological actuator and biorobot followed by the functionalization with fibronectin is described in this first part. In the second part of this two-part article, we detail the incorporation of cardiomyocytes and characterize the biological actuator and biorobot function. Both incorporate a base and tail (cantilever) which produce fin-based propulsion. The tail is constructed with soft lithography techniques using PDMS and laser engraving. After incorporating the tail with the device base, it is functionalized with a cell adhesive protein and seeded confluently with cardiomyocytes. The base of the biological actuator consists of a solid PDMS block with a central glass bead (acts as a weight). The base of the biorobot consists of two composite PDMS materials, Ni-PDMS and microballoon-PDMS (MB-PDMS). The nickel powder (in Ni-PDMS) allows magnetic control of the biorobot during cells seeding and stability during locomotion. Microballoons (in MB-PDMS) decrease the density of MB-PDMS, and enable the biorobot to float and swim steadily. The use of these two materials with different mass densities, enabled precise control over the weight distribution to ensure a positive restoration force at any angle of the biorobot. This technique produces a magnetically controlled self-stabilizing swimming biorobot.

Conformable actively multiplexed high-density surface electrode array for brain interfacing

DOEpatents

Rogers, John; Kim, Dae-Hyeong; Litt, Brian; Viventi, Jonathan

2015-01-13

Provided are methods and devices for interfacing with brain tissue, specifically for monitoring and/or actuation of spatio-temporal electrical waveforms. The device is conformable having a high electrode density and high spatial and temporal resolution. A conformable substrate supports a conformable electronic circuit and a barrier layer. Electrodes are positioned to provide electrical contact with a brain tissue. A controller monitors or actuates the electrodes, thereby interfacing with the brain tissue. In an aspect, methods are provided to monitor or actuate spatio-temporal electrical waveform over large brain surface areas by any of the devices disclosed herein.

High performing actuation system for use with a louver array for satellite thermal control. [design and performance tests on prototype Bourdon spiral configuration

NASA Technical Reports Server (NTRS)

Reusser, P. U.; Coebergh, J. A. F.

1973-01-01

A high performing actuation system has been developed to drive one pair or a set of 9 pairs of louver blades. The system uses a Bourdon spiral as the driving member. The response time of the liquid expansion of the spiral system is in the order of three seconds. Besides performance tests, qualification tests have been carried out on a prototype system, demonstrating that the actuation system withstands normal launching conditions; projected operating life of 7 years with more than 7000 cycles can be expected.

Model-based framework for multi-axial real-time hybrid simulation testing

NASA Astrophysics Data System (ADS)

Fermandois, Gaston A.; Spencer, Billie F.

2017-10-01

Real-time hybrid simulation is an efficient and cost-effective dynamic testing technique for performance evaluation of structural systems subjected to earthquake loading with rate-dependent behavior. A loading assembly with multiple actuators is required to impose realistic boundary conditions on physical specimens. However, such a testing system is expected to exhibit significant dynamic coupling of the actuators and suffer from time lags that are associated with the dynamics of the servo-hydraulic system, as well as control-structure interaction (CSI). One approach to reducing experimental errors considers a multi-input, multi-output (MIMO) controller design, yielding accurate reference tracking and noise rejection. In this paper, a framework for multi-axial real-time hybrid simulation (maRTHS) testing is presented. The methodology employs a real-time feedback-feedforward controller for multiple actuators commanded in Cartesian coordinates. Kinematic transformations between actuator space and Cartesian space are derived for all six-degrees-offreedom of the moving platform. Then, a frequency domain identification technique is used to develop an accurate MIMO transfer function of the system. Further, a Cartesian-domain model-based feedforward-feedback controller is implemented for time lag compensation and to increase the robustness of the reference tracking for given model uncertainty. The framework is implemented using the 1/5th-scale Load and Boundary Condition Box (LBCB) located at the University of Illinois at Urbana- Champaign. To demonstrate the efficacy of the proposed methodology, a single-story frame subjected to earthquake loading is tested. One of the columns in the frame is represented physically in the laboratory as a cantilevered steel column. For realtime execution, the numerical substructure, kinematic transformations, and controllers are implemented on a digital signal processor. Results show excellent performance of the maRTHS framework when six-degrees-of-freedom are controlled at the interface between substructures.

Coupled Simulation of Thermomagnetic Energy Generation Based on NiMnGa Heusler Alloy Films

NASA Astrophysics Data System (ADS)

Kohl, Manfred; Gueltig, Marcel; Wendler, Frank

2018-03-01

This paper presents a simulation model for the coupled dynamic properties of thermomagnetic generators based on magnetic shape memory alloy (MSMA) films. MSMA thermomagnetic generators exploit the large abrupt temperature-induced change of magnetization at the first- or second-order magnetic transition as well as the short heat transfer times due to the large surface-to-volume ratio of films. These properties allow for resonant self-actuation of freely movable MSMA cantilever devices showing thermomagnetic duty cycles in the order of 10 ms duration, which matches with the period of oscillatory motion. We present a numerical analysis of the energy conversion processes to understand the effect of design parameters on efficiency and power output. A lumped element model is chosen to describe the time dependence of MSMA cantilever deflection and of temperature profiles as well as the magnitude and phase dependency of magnetization change. The simulation model quantitatively describes experimentally observed oscillatory motion and resulting power output in the order of 100 mW cm-3. Furthermore, it predicts a power output of 490 mW cm-3 for advanced film materials with temperature-dependent change of magnetization Δ M/Δ T of 4 A m2 (kg K)-1, which challenges state-of-the-art thermoelectric devices.

Coupled Simulation of Thermomagnetic Energy Generation Based on NiMnGa Heusler Alloy Films

NASA Astrophysics Data System (ADS)

Kohl, Manfred; Gueltig, Marcel; Wendler, Frank

2018-01-01

This paper presents a simulation model for the coupled dynamic properties of thermomagnetic generators based on magnetic shape memory alloy (MSMA) films. MSMA thermomagnetic generators exploit the large abrupt temperature-induced change of magnetization at the first- or second-order magnetic transition as well as the short heat transfer times due to the large surface-to-volume ratio of films. These properties allow for resonant self-actuation of freely movable MSMA cantilever devices showing thermomagnetic duty cycles in the order of 10 ms duration, which matches with the period of oscillatory motion. We present a numerical analysis of the energy conversion processes to understand the effect of design parameters on efficiency and power output. A lumped element model is chosen to describe the time dependence of MSMA cantilever deflection and of temperature profiles as well as the magnitude and phase dependency of magnetization change. The simulation model quantitatively describes experimentally observed oscillatory motion and resulting power output in the order of 100 mW cm-3. Furthermore, it predicts a power output of 490 mW cm-3 for advanced film materials with temperature-dependent change of magnetization ΔM/ΔT of 4 A m2 (kg K)-1, which challenges state-of-the-art thermoelectric devices.

Design and modeling of magnetically driven electric-field sensor for non-contact DC voltage measurement in electric power systems.

PubMed

Wang, Decai; Li, Ping; Wen, Yumei

2016-10-01

In this paper, the design and modeling of a magnetically driven electric-field sensor for non-contact DC voltage measurement are presented. The magnetic drive structure of the sensor is composed of a small solenoid and a cantilever beam with a cylindrical magnet mounted on it. The interaction of the magnet and the solenoid provides the magnetic driving force for the sensor. Employing magnetic drive structure brings the benefits of low driving voltage and large vibrating displacement, which consequently results in less interference from the drive signal. In the theoretical analyses, the capacitance calculation model between the wire and the sensing electrode is built. The expression of the magnetic driving force is derived by the method of linear fitting. The dynamical model of the magnetic-driven cantilever beam actuator is built by using Euler-Bernoulli theory and distributed parameter method. Taking advantage of the theoretical model, the output voltage of proposed sensor can be predicted. The experimental results are in good agreement with the theoretical results. The proposed sensor shows a favorable linear response characteristic. The proposed sensor has a measuring sensitivity of 9.87 μV/(V/m) at an excitation current of 37.5 mA. The electric field intensity resolution can reach 10.13 V/m.

Advanced electric-field scanning probe lithography on molecular resist using active cantilever

NASA Astrophysics Data System (ADS)

Kaestner, Marcus; Aydogan, Cemal; Ivanov, Tzvetan; Ahmad, Ahmad; Angelov, Tihomir; Reum, Alexander; Ishchuk, Valentyn; Krivoshapkina, Yana; Hofer, Manuel; Lenk, Steve; Atanasov, Ivaylo; Holz, Mathias; Rangelow, Ivo W.

2015-07-01

The routine "on demand" fabrication of features smaller than 10 nm opens up new possibilities for the realization of many devices. Driven by the thermally actuated piezoresistive cantilever technology, we have developed a prototype of a scanning probe lithography (SPL) platform which is able to image, inspect, align, and pattern features down to the single digit nanoregime. Here, we present examples of practical applications of the previously published electric-field based current-controlled scanning probe lithography. In particular, individual patterning tests are carried out on calixarene by using our developed table-top SPL system. We have demonstrated the application of a step-and-repeat SPL method including optical as well as atomic force microscopy-based navigation and alignment. The closed-loop lithography scheme was applied to sequentially write positive and negative tone features. Due to the integrated unique combination of read-write cycling, each single feature is aligned separately with the highest precision and inspected after patterning. This routine was applied to create a pattern step by step. Finally, we have demonstrated the patterning over larger areas, over existing topography, and the practical applicability of the SPL processes for lithography down to 13-nm pitch patterns. To enhance the throughput capability variable beam diameter electric field, current-controlled SPL is briefly discussed.

Measuring the bending of asymmetric planar EAP structures

NASA Astrophysics Data System (ADS)

Weiss, Florian M.; Zhao, Xue; Thalmann, Peter; Deyhle, Hans; Urwyler, Prabitha; Kovacs, Gabor; Müller, Bert

2013-04-01

The geometric characterization of low-voltage dielectric electro-active polymer (EAP) structures, comprised of nanometer thickness but areas of square centimeters, for applications such as artificial sphincters requires methods with nanometer precision. Direct optical detection is usually restricted to sub-micrometer resolution because of the wavelength of the light applied. Therefore, we propose to take advantage of the cantilever bending system with optical readout revealing a sub-micrometer resolution at the deflection of the free end. It is demonstrated that this approach allows us to detect bending of rather conventional planar asymmetric, dielectric EAP-structures applying voltages well below 10 V. For this purpose, we built 100 μm-thin silicone films between 50 nm-thin silver layers on a 25 μm-thin polyetheretherketone (PEEK) substrate. The increase of the applied voltage in steps of 50 V until 1 kV resulted in a cantilever bending that exhibits only in restricted ranges the expected square dependence. The mean laser beam displacement on the detector corresponded to 6 nm per volt. The apparatus will therefore become a powerful mean to analyze and thereby improve low-voltage dielectric EAP-structures to realize nanometer-thin layers for stack actuators to be incorporated into artificial sphincter systems for treating severe urinary and fecal incontinence.

Enhancing Optical Forces in InP-Based Waveguides.

PubMed

Aryaee Panah, Mohammad Esmail; Semenova, Elizaveta S; Lavrinenko, Andrei V

2017-06-08

Cantilever sensors are among the most important microelectromechanical systems (MEMS), which are usually actuated by electrostatic forces or piezoelectric elements. Although well-developed microfabrication technology has made silicon the prevailing material for MEMS, unique properties of other materials are overlooked in this context. Here we investigate optically induced forces exerted upon a semi-insulating InP waveguide suspended above a highly doped InP:Si substrate, in three different regimes: the epsilon-near-zero (ENZ), with excitation of surface plasmon polaritons (SPPs) and phonons excitation. An order of magnitude amplification of the force is observed when light is coupled to SPPs, and three orders of magnitude amplification is achieved in the phonon excitation regime. In the ENZ regime, the force is found to be repulsive and higher than that in a waveguide suspended above a dielectric substrate. Low losses in InP:Si result in a big propagation length. The induced deflection can be detected by measuring the phase change of the light when passing through the waveguide, which enables all-optical functioning, and paves the way towards integration and miniaturization of micro-cantilevers. In addition, tunability of the ENZ and the SPP excitation wavelength ranges, via adjusting the carrier concentration, provides an extra degree of freedom for designing MEMS devices.

Demonstration of Vibrational Braille Code Display Using Large Displacement Micro-Electro-Mechanical Systems Actuators

NASA Astrophysics Data System (ADS)

Watanabe, Junpei; Ishikawa, Hiroaki; Arouette, Xavier; Matsumoto, Yasuaki; Miki, Norihisa

2012-06-01

In this paper, we present a vibrational Braille code display with large-displacement micro-electro-mechanical systems (MEMS) actuator arrays. Tactile receptors are more sensitive to vibrational stimuli than to static ones. Therefore, when each cell of the Braille code vibrates at optimal frequencies, subjects can recognize the codes more efficiently. We fabricated a vibrational Braille code display that used actuators consisting of piezoelectric actuators and a hydraulic displacement amplification mechanism (HDAM) as cells. The HDAM that encapsulated incompressible liquids in microchambers with two flexible polymer membranes could amplify the displacement of the MEMS actuator. We investigated the voltage required for subjects to recognize Braille codes when each cell, i.e., the large-displacement MEMS actuator, vibrated at various frequencies. Lower voltages were required at vibration frequencies higher than 50 Hz than at vibration frequencies lower than 50 Hz, which verified that the proposed vibrational Braille code display is efficient by successfully exploiting the characteristics of human tactile receptors.

Large array of 2048 tilting micromirrors for astronomical spectroscopy: optical and cryogenic characterization

NASA Astrophysics Data System (ADS)

Zamkotsian, Frédéric; Canonica, Michael; Lanzoni, Patrick; Noell, Wilfried; Lani, Sebastien

2014-03-01

Multi-object spectroscopy (MOS) is a powerful tool for space and ground-based telescopes for the study of the formation and evolution of galaxies. This technique requires a programmable slit mask for astronomical object selection. We are engaged in a European development of micromirror arrays (MMA) for generating reflective slit masks in future MOS, called MIRA. MMA with 100 × 200 μm2 single-crystal silicon micromirrors were successfully designed, fabricated and tested. Arrays are composed of 2048 micromirrors (32 x 64) with a peak-to-valley deformation less than 10 nm, a tilt angle of 24° for an actuation voltage of 130 V. The micromirrors were actuated successfully before, during and after cryogenic cooling, down to 162K. The micromirror surface deformation was measured at cryo and is below 30 nm peak-to-valley. These performances demonstrate the ability of such MOEMS device to work as objects selector in future generation of MOS instruments both in ground-based and space telescopes. In order to fill large focal planes (mosaicing of several chips), we are currently developing large micromirror arrays integrated with their electronics.

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

PubMed Central

Qiu, Yongqiang; Gigliotti, James V.; Wallace, Margeaux; Griggio, Flavio; Demore, Christine E. M.; Cochran, Sandy; Trolier-McKinstry, Susan

2015-01-01

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed. PMID:25855038

Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging.

PubMed

Qiu, Yongqiang; Gigliotti, James V; Wallace, Margeaux; Griggio, Flavio; Demore, Christine E M; Cochran, Sandy; Trolier-McKinstry, Susan

2015-04-03

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed.

Modeling and Application of Piezoelectric Materials in Repair of Engineering Structures

NASA Astrophysics Data System (ADS)

Wu, Nan

The shear horizontal wave propagation and vibration of piezoelectric coupled structures under an open circuit electrical boundary condition are studied. Following the studies on the dynamic response of piezoelectric coupled structures, the repair of both crack/notch and delaminated structures using piezoelectric materials are conducted. The main contribution was the proposed the active structural repair design using piezoelectric materials for different structures. An accurate model for the piezoelectric effect on the shear wave propagation is first proposed to guide the application of piezoelectric materials as sensors and actuators in the repair of engineering structures. A vibration analysis of a circular steel substrate surface bonded by a piezoelectric layer with open circuit is presented. The mechanical models and solutions for the wave propagation and vibration analysis of piezoelectric coupled structures are established based on the Kirchhoff plate model and Maxwell equation. Following the studies of the dynamic response of piezoelectric coupled structures, a close-loop feedback control repair methodology is proposed for a vibrating delaminated beam structure by using piezoelectric patches. The electromechanical characteristic of the piezoelectric material is employed to induce a local shear force above the delamination area via an external actuation voltage, which is designed as a feedback of the deflection of a vibrating beam and a delaminated plate, to reduce the stress singularity around the delamination tips. Furthermore, an experimental realization of an effective repair of a notched cantilever beam structure subjected to a dynamic loading by use of piezoelectric patches is reported. A small piezoelectric patch used as a sensor is placed on the notch position to monitor the severity of the stress singularity around the notch area by measuring the charge output on the sensor, and a patch used as an actuator is located around the notch area to generate a required bending moment by employing an actuation voltage to reduce the stress singularity at the notch position. The actuation voltage on the actuator is designed from a feedback circuit process. Through the analytical model, FEM simulation and experimental studies, the active structural repair method using piezoelectric materials is realized and proved to be feasible and practical.

An IPMC-enabled bio-inspired bending/twisting fin for underwater applications

NASA Astrophysics Data System (ADS)

Palmre, Viljar; Hubbard, Joel J.; Fleming, Maxwell; Pugal, David; Kim, Sungjun; Kim, Kwang J.; Leang, Kam K.

2013-01-01

This paper discusses the design, fabrication, and characterization of an ionic polymer-metal composite (IPMC) actuator-based bio-inspired active fin capable of bending and twisting motion. It is pointed out that IPMC strip actuators are used in the simple cantilever configuration to create simple bending (flapping-like) motion for propulsion in underwater autonomous systems. However, the resulting motion is a simple 1D bending and performance is rather limited. To enable more complex deformation, such as the flapping (pitch and heaving) motion of real pectoral and caudal fish fins, a new approach which involves molding or integrating IPMC actuators into a soft boot material to create an active control surface (called a ‘fin’) is presented. The fin can be used to realize complex deformation depending on the orientation and placement of the actuators. In contrast to previously created IPMCs with patterned electrodes for the same purpose, the proposed design avoids (1) the more expensive process of electroless plating platinum all throughout the surface of the actuator and (2) the need for specially patterning the electrodes. Therefore, standard shaped IPMC actuators such as those with rectangular dimensions with varying thicknesses can be used. One unique advantage of the proposed structural design is that custom shaped fins and control surfaces can be easily created without special materials processing. The molding process is cost effective and does not require functionalizing or ‘activating’ the boot material similar to creating IPMCs. For a prototype fin (90 mm wide × 60 mm long × 1.5 mm thick), the measured maximum tip displacement was approximately 44 mm and the twist angle of the fin exceeded 10°. Lift and drag measurements in water where the prototype fin with an airfoil profile was dragged through water at a velocity of 21 cm s-1 showed that the lift and drag forces can be affected by controlling the IPMCs embedded into the fin structure. These results suggest that such IPMC-enabled fin designs can be used for developing active propeller blades or control surfaces on underwater vehicles.

Image contrast mechanisms in dynamic friction force microscopy: Antimony particles on graphite

NASA Astrophysics Data System (ADS)

Mertens, Felix; Göddenhenrich, Thomas; Dietzel, Dirk; Schirmeisen, Andre

2017-01-01

Dynamic Friction Force Microscopy (DFFM) is a technique based on Atomic Force Microscopy (AFM) where resonance oscillations of the cantilever are excited by lateral actuation of the sample. During this process, the AFM tip in contact with the sample undergoes a complex movement which consists of alternating periods of sticking and sliding. Therefore, DFFM can give access to dynamic transition effects in friction that are not accessible by alternative techniques. Using antimony nanoparticles on graphite as a model system, we analyzed how combined influences of friction and topography can effect different experimental configurations of DFFM. Based on the experimental results, for example, contrast inversion between fractional resonance and band excitation imaging strategies to extract reliable tribological information from DFFM images are devised.

Nanofork for single cells adhesion measurement via ESEM-nanomanipulator system.

PubMed

Ahmad, Mohd Ridzuan; Nakajima, Masahiro; Kojima, Masaru; Kojima, Seiji; Homma, Michio; Fukuda, Toshio

2012-03-01

In this paper, single cells adhesion force was measured using a nanofork. The nanofork was used to pick up a single cell on a line array substrate inside an environmental scanning electron microscope (ESEM). The line array substrate was used to provide small gaps between the single cells and the substrate. Therefore, the nanofork could be inserted through these gaps in order to successfully pick up a single cell. Adhesion force was measured during the cell pick-up process from the deflection of the cantilever beam. The nanofork was fabricated using focused ion beam (FIB) etching process while the line array substrate was fabricated using nanoimprinting technology. As to investigate the effect of contact area on the strength of the adhesion force, two sizes of gap distance of line array substrate were used, i.e., 1 μm and 2 μm. Results showed that cells attached on the 1 μm gap line array substrate required more force to be released as compared to the cells attached on the 1 μm gap line array substrate.

An application of neural network for Structural Health Monitoring of an adaptive wing with an array of FBG sensors

NASA Astrophysics Data System (ADS)

Mieloszyk, Magdalena; Krawczuk, Marek; Skarbek, Lukasz; Ostachowicz, Wieslaw

2011-07-01

This paper presents an application of neural networks to determinate the level of activation of shape memory alloy actuators of an adaptive wing. In this concept the shape of the wing can be controlled and altered thanks to the wing design and the use of integrated shape memory alloy actuators. The wing is assumed as assembled from a number of wing sections that relative positions can be controlled independently by thermal activation of shape memory actuators. The investigated wing is employed with an array of Fibre Bragg Grating sensors. The Fibre Bragg Grating sensors with combination of a neural network have been used to Structural Health Monitoring of the wing condition. The FBG sensors are a great tool to control the condition of composite structures due to their immunity to electromagnetic fields as well as their small size and weight. They can be mounted onto the surface or embedded into the wing composite material without any significant influence on the wing strength. The paper concentrates on analysis of the determination of the twisting moment produced by an activated shape memory alloy actuator. This has been analysed both numerically using the finite element method by a commercial code ABAQUS® and experimentally using Fibre Bragg Grating sensor measurements. The results of the analysis have been then used by a neural network to determine twisting moments produced by each shape memory alloy actuator.

Evolution from MEMS-based Linear Drives to Bio-based Nano Drives

NASA Astrophysics Data System (ADS)

Fujita, Hiroyuki

The successful extension of semiconductor technology to fabricate mechanical parts of the sizes from 10 to 100 micrometers opened wide ranges of possibilities for micromechanical devices and systems. The fabrication technique is called micromachining. Micromachining processes are based on silicon integrated circuits (IC) technology and used to build three-dimensional structures and movable parts by the combination of lithography, etching, film deposition, and wafer bonding. Microactuators are the key devices allowing MEMS to perform physical functions. Some of them are driven by electric, magnetic, and fluidic forces. Some others utilize actuator materials including piezoelectric (PZT, ZnO, quartz) and magnetostrictive materials (TbFe), shape memory alloy (TiNi) and bio molecular motors. This paper deals with the development of MEMS based microactuators, especially linear drives, following my own research experience. They include an electrostatic actuator, a superconductive levitated actuator, arrayed actuators, and a bio-motor-driven actuator.

Artificial Intelligence Based Control Power Optimization on Tailless Aircraft. [ARMD Seedling Fund Phase I

NASA Technical Reports Server (NTRS)

Gern, Frank; Vicroy, Dan D.; Mulani, Sameer B.; Chhabra, Rupanshi; Kapania, Rakesh K.; Schetz, Joseph A.; Brown, Derrell; Princen, Norman H.

2014-01-01

Traditional methods of control allocation optimization have shown difficulties in exploiting the full potential of controlling large arrays of control devices on innovative air vehicles. Artificial neutral networks are inspired by biological nervous systems and neurocomputing has successfully been applied to a variety of complex optimization problems. This project investigates the potential of applying neurocomputing to the control allocation optimization problem of Hybrid Wing Body (HWB) aircraft concepts to minimize control power, hinge moments, and actuator forces, while keeping system weights within acceptable limits. The main objective of this project is to develop a proof-of-concept process suitable to demonstrate the potential of using neurocomputing for optimizing actuation power for aircraft featuring multiple independently actuated control surfaces. A Nastran aeroservoelastic finite element model is used to generate a learning database of hinge moment and actuation power characteristics for an array of flight conditions and control surface deflections. An artificial neural network incorporating a genetic algorithm then uses this training data to perform control allocation optimization for the investigated aircraft configuration. The phase I project showed that optimization results for the sum of required hinge moments are improved by more than 12% over the best Nastran solution by using the neural network optimization process.

Problems Encountered During the Recertification of the GLORY Solar Array Dual Axis Gimbal Drive Actuators

NASA Technical Reports Server (NTRS)

Saltzman, Marc; Schepis, Jospeh P.; Bruckner, Michael J.

2009-01-01

The Glory observatory is the current incarnation of the Vegetation Canopy Lidar (VCL) mission spacecraft bus. The VCL spacecraft bus, having been cancelled for programmatic reasons in 2000, was nearly integrated when it was put into storage for possible future use. The Glory mission was a suitable candidate for using this spacecraft and in 2006 an effort to recertify the two axis solar array gimbal drive after its extended storage was begun. What was expected to be a simple performance validation of the two dual axis gimbal stepper motors became a serious test, diagnosis and repair task once questions arose on the flight worthiness of the hardware. A significant test program logic flow was developed which identified decisions that could be made based on the results of individual recertification tests. Without disassembling the bi-axial gimbals, beginning with stepper motor threshold voltage measurements and relating these to powered drive torque measurements, both performed at the spacecraft integrator s facility, a confusing picture of the health of the actuators came to light. Tests at the gimbal assembly level and tests of the disassembled actuators were performed by the manufacturer to validate our results and torque discrepancies were noted. Further disassembly to the component level of the actuator revealed the source of the torque loss.

Performance of Optimized Actuator and Sensor Arrays in an Active Noise Control System

NASA Technical Reports Server (NTRS)

Palumbo, D. L.; Padula, S. L.; Lyle, K. H.; Cline, J. H.; Cabell, R. H.

1996-01-01

Experiments have been conducted in NASA Langley's Acoustics and Dynamics Laboratory to determine the effectiveness of optimized actuator/sensor architectures and controller algorithms for active control of harmonic interior noise. Tests were conducted in a large scale fuselage model - a composite cylinder which simulates a commuter class aircraft fuselage with three sections of trim panel and a floor. Using an optimization technique based on the component transfer functions, combinations of 4 out of 8 piezoceramic actuators and 8 out of 462 microphone locations were evaluated against predicted performance. A combinatorial optimization technique called tabu search was employed to select the optimum transducer arrays. Three test frequencies represent the cases of a strong acoustic and strong structural response, a weak acoustic and strong structural response and a strong acoustic and weak structural response. Noise reduction was obtained using a Time Averaged/Gradient Descent (TAGD) controller. Results indicate that the optimization technique successfully predicted best and worst case performance. An enhancement of the TAGD control algorithm was also evaluated. The principal components of the actuator/sensor transfer functions were used in the PC-TAGD controller. The principal components are shown to be independent of each other while providing control as effective as the standard TAGD.

Tactile Feedback Display with Spatial and Temporal Resolutions

PubMed Central

Vishniakou, Siarhei; Lewis, Brian W.; Niu, Xiaofan; Kargar, Alireza; Sun, Ke; Kalajian, Michael; Park, Namseok; Yang, Muchuan; Jing, Yi; Brochu, Paul; Sun, Zhelin; Li, Chun; Nguyen, Truong; Pei, Qibing; Wang, Deli

2013-01-01

We report the electronic recording of the touch contact and pressure using an active matrix pressure sensor array made of transparent zinc oxide thin-film transistors and tactile feedback display using an array of diaphragm actuators made of an interpenetrating polymer elastomer network. Digital replay, editing and manipulation of the recorded touch events were demonstrated with both spatial and temporal resolutions. Analog reproduction of the force is also shown possible using the polymer actuators, despite of the high driving voltage. The ability to record, store, edit, and replay touch information adds an additional dimension to digital technologies and extends the capabilities of modern information exchange with the potential to revolutionize physical learning, social networking, e-commerce, robotics, gaming, medical and military applications. PMID:23982053

Tactile feedback display with spatial and temporal resolutions.

PubMed

Vishniakou, Siarhei; Lewis, Brian W; Niu, Xiaofan; Kargar, Alireza; Sun, Ke; Kalajian, Michael; Park, Namseok; Yang, Muchuan; Jing, Yi; Brochu, Paul; Sun, Zhelin; Li, Chun; Nguyen, Truong; Pei, Qibing; Wang, Deli

2013-01-01

We report the electronic recording of the touch contact and pressure using an active matrix pressure sensor array made of transparent zinc oxide thin-film transistors and tactile feedback display using an array of diaphragm actuators made of an interpenetrating polymer elastomer network. Digital replay, editing and manipulation of the recorded touch events were demonstrated with both spatial and temporal resolutions. Analog reproduction of the force is also shown possible using the polymer actuators, despite of the high driving voltage. The ability to record, store, edit, and replay touch information adds an additional dimension to digital technologies and extends the capabilities of modern information exchange with the potential to revolutionize physical learning, social networking, e-commerce, robotics, gaming, medical and military applications.

Droplet Translation Actuated by Photoelectrowetting.

PubMed

Palma, Cesar; Deegan, Robert D

2018-03-13

In traditional electrowetting-on-dielectric (EWOD) devices, droplets are moved about a substrate using electric fields produced by an array of discrete electrodes. In this study, we show that a drop can be driven across a substrate with a localized light beam by exploiting the photoelectrowetting (PEW) effect, a light-activated variant of EWOD. Droplet transport actuated by PEW eliminates the need for electrode arrays and the complexities entailed in their fabrication and control, and offers a new approach for designing lab-on-a-chip applications. We report measurements of the maximum droplet speed as a function of frequency and magnitude of the applied bias, intensity of illumination, volume of the droplet, and viscosity and also introduce a model that reproduces these data.

Tactile Feedback Display with Spatial and Temporal Resolutions

NASA Astrophysics Data System (ADS)

Vishniakou, Siarhei; Lewis, Brian W.; Niu, Xiaofan; Kargar, Alireza; Sun, Ke; Kalajian, Michael; Park, Namseok; Yang, Muchuan; Jing, Yi; Brochu, Paul; Sun, Zhelin; Li, Chun; Nguyen, Truong; Pei, Qibing; Wang, Deli

2013-08-01

We report the electronic recording of the touch contact and pressure using an active matrix pressure sensor array made of transparent zinc oxide thin-film transistors and tactile feedback display using an array of diaphragm actuators made of an interpenetrating polymer elastomer network. Digital replay, editing and manipulation of the recorded touch events were demonstrated with both spatial and temporal resolutions. Analog reproduction of the force is also shown possible using the polymer actuators, despite of the high driving voltage. The ability to record, store, edit, and replay touch information adds an additional dimension to digital technologies and extends the capabilities of modern information exchange with the potential to revolutionize physical learning, social networking, e-commerce, robotics, gaming, medical and military applications.

Large eddy simulation of the tidal power plant deep green using the actuator line method

NASA Astrophysics Data System (ADS)

Fredriksson, S. T.; Broström, G.; Jansson, M.; Nilsson, H.; Bergqvist, B.

2017-12-01

Tidal energy has the potential to provide a substantial part of the sustainable electric power generation. The tidal power plant developed by Minesto, called Deep Green, is a novel technology using a ‘flying’ kite with an attached turbine, moving at a speed several times higher than the mean flow. Multiple Deep Green power plants will eventually form arrays, which require knowledge of both flow interactions between individual devices and how the array influences the surrounding environment. The present study uses large eddy simulations (LES) and an actuator line model (ALM) to analyze the oscillating turbulent boundary layer flow in tidal currents without and with a Deep Green power plant. We present the modeling technique and preliminary results so far.

Fabrication of a Miniaturized ZnO Nanowire Accelerometer and Its Performance Tests

PubMed Central

Kim, Hyun Chan; Song, Sangho; Kim, Jaehwan

2016-01-01

This paper reports a miniaturized piezoelectric accelerometer suitable for a small haptic actuator array. The accelerometer is made with zinc oxide (ZnO) nanowire (NW) grown on a copper wafer by a hydrothermal process. The size of the accelerometer is 1.5 × 1.5 mm2, thus fitting the 1.8 × 1.8 mm2 haptic actuator array cell. The detailed fabrication process of the miniaturized accelerometer is illustrated. Performance evaluation of the fabricated accelerometer is conducted by comparing it with a commercial piezoelectric accelerometer. The output current of the fabricated accelerometer increases linearly with the acceleration. The miniaturized ZnO NW accelerometer is feasible for acceleration measurement of small and lightweight devices. PMID:27649184

Oxidative stress detection by MEMS cantilever sensor array based electronic nose

NASA Astrophysics Data System (ADS)

Gupta, Anurag; Singh, T. Sonamani; Singh, Priyanka; Yadava, R. D. S.

2018-05-01

This paper is concerned with analyzing the role of polymer swelling induced surface stress in MEMS chemical sensors. The objective is to determine the impact of surface stress on the chemical discrimination ability of MEMS resonator sensors. We considered a case study of hypoxia detection by MEMS sensor array and performed several types of simulation experiments for detection of oxidative stress volatile organic markers in human breath. Both types of sensor response models that account for the surface stress effect and that did not were considered for the analyses in comparison. It is found that the surface stress (hence the polymer swelling) provides better chemical discrimination ability to polymer coated MEMS sensors.

Close-packed Arrays of Transition-edge X-ray Microcalorimeters with High Spectral Resolution at 5.9 keV

NASA Technical Reports Server (NTRS)

Iyomoto, N.; Bandler, S. R.; Brekosky, R. P.; Brown, A.-D.; Chervenak, J. A.; Finkbeiner, F. M.; Kelley, R. L.; Kilbourne, C. A.; Porter, F. S.; Sadleir, J. E.;

High-frequency performance for a spiral-shaped piezoelectric bimorph

NASA Astrophysics Data System (ADS)

Huang, Fang Sheng; Feng, Zhi Hua; Ma, Yu Ting; Pan, Qiao Sheng; Zhang, Lian Sheng; Liu, Yong Bin; He, Liang Guo

2018-04-01

Piezoelectric cantilever is suitable as an actuator for micro-flapping-wing aircraft. Higher resonant frequency brings about stronger flight energy, and the flight amplitude can be compensated by displacement-amplification mechanism, such as lever. To obtain a higher resonant frequency, straight piezoelectric bimorph was rolled into spiral-shaped piezoelectric bimorph with identical effective length in this study, which is verified in COMSOL simulations. Simulation results show that compared with the straight piezoelectric bimorph, the spiral-shaped piezoelectric bimorph with two turns has higher inherent frequencies (from 204.79 Hz to 504.84 Hz in terms of axial oscillation mode, and from 319.77 Hz to 704.48 Hz in terms of tangential torsional mode). The spiral-shaped piezoelectric bimorph is fabricated by a precise laser cutting process and consists of two turns with effective length of 60 mm, width of 2.5 mm, and thickness of 1.6 mm, respectively. With the excitation voltage of 100 Vpp applying an electric field across the thickness of the bimorph, the tip displacement of the actuator in the axial oscillation and tangential torsional modes are 85 μm and 15 μm, respectively.

Real Time Digital Control of a Magnetostrictive Actuator

NASA Technical Reports Server (NTRS)

Zrostlik, Rick L.; Hall, David L.; Flatau, Alison B.

1996-01-01

The use of the magnetostrictive material Terfenol-D as a motion source in active vibration control (AVC) systems are being studied. Currently it is of limited use due to the nonlinear nature of the strain versus magnetization curve and the magnetic hysteresis in the Terfenol-D. One manifestation of these nonlinearities is waveform distortion in the output velocity of the transducer. For Terfenol-D to be used in ever greater numbers of AVC systems, these nonlinearities must be addressed. In this study the nonlinearities are treated as disturbances to a linear system. The acceleration output is used in simple analog and digital feedback control schemes to improve linearity of the transducer. In addition, the use of a Terfenol-D actuator in an AVC system is verified. Both analog and digital controllers are implemented and results compared. A cantilever beam system is considered for AVC applications. The second thrust of this presentation is the reduction of harmonic distortions. Two conclusions can be reached from this work. One, the linearization of Terfenol-D transducers is possible with the use of feedback controllers, both digital and analog. Second, Terfenol-D is a viable motion source in active vibration control systems utilizing either analog or digital controllers.

An Evaluation System for the Contact Electrification of a Single Microparticle Using Microelectromechanical-Based Actuated Tweezers.

PubMed

Yamaguchi, Daichi

2018-06-05

The image quality of laser and multi-function printers that make use of electrophotography depends on the amount of surface charge generated by contact electrification on the toner particles. However, because it has been impossible to experimentally evaluate such amounts under controlled contact conditions using macroscopic measurements, theoretical elucidation of the contact electrification mechanism has not progressed sufficiently. In the present study, we have developed a system to experimentally evaluate the contact electrification of a single particle using atomic force microscopy (AFM) and nanotweezers (microelectromechanical systems (MEMS)-based actuated tweezers). This system performs, in succession, (i) a contact test that makes use of the nanotweezers and three piezoelectric stages, and (ii) an image force measurement using the AFM cantilever. Using this system, contact electrification was evaluated under controlled conditions, such as the contact number and the indentation depth. In addition, differences in contact electrification due to the amount of external surface additives were investigated. The results reveal that a coating with external additives leads to a decrease in the amount of contact electrification due to a reduction in the contact area with the substrate.

Compliant cantilevered micromold

DOEpatents

Morales, Alfredo Martin [Pleasanton, CA; Domeier, Linda A [Danville, CA; Gonzales, Marcela G [Seattle, WA; Keifer, Patrick N [Livermore, CA; Garino, Terry Joseph [Albuquerque, NM

2006-08-15

A compliant cantilevered three-dimensional micromold is provided. The compliant cantilevered micromold is suitable for use in the replication of cantilevered microparts and greatly simplifies the replication of such cantilevered parts. The compliant cantilevered micromold may be used to fabricate microparts using casting or electroforming techniques. When the compliant micromold is used to fabricate electroformed cantilevered parts, the micromold will also comprise an electrically conducting base formed by a porous metal substrate that is embedded within the compliant cantilevered micromold. Methods for fabricating the compliant cantilevered micromold as well as methods of replicating cantilevered microparts using the compliant cantilevered micromold are also provided.

Method for providing a compliant cantilevered micromold

DOEpatents

Morales, Alfredo M.; Domeier, Linda A.; Gonzales, Marcela G.; Keifer, Patrick N.; Garino, Terry J.

2008-12-16

A compliant cantilevered three-dimensional micromold is provided. The compliant cantilevered micromold is suitable for use in the replication of cantilevered microparts and greatly simplifies the replication of such cantilevered parts. The compliant cantilevered micromold may be used to fabricate microparts using casting or electroforming techniques. When the compliant micromold is used to fabricate electroformed cantilevered parts, the micromold will also comprise an electrically conducting base formed by a porous metal substrate that is embedded within the compliant cantilevered micromold. Methods for fabricating the compliant cantilevered micromold as well as methods of replicating cantilevered microparts using the compliant cantilevered micromold are also provided.

Cross-flow turbines: physical and numerical model studies towards improved array simulations

NASA Astrophysics Data System (ADS)

Wosnik, M.; Bachant, P.

2015-12-01

Cross-flow, or vertical-axis turbines, show potential in marine hydrokinetic (MHK) and wind energy applications. As turbine designs mature, the research focus is shifting from individual devices towards improving turbine array layouts for maximizing overall power output, i.e., minimizing wake interference for axial-flow turbines, or taking advantage of constructive wake interaction for cross-flow turbines. Numerical simulations are generally better suited to explore the turbine array design parameter space, as physical model studies of large arrays at large model scale would be expensive. However, since the computing power available today is not sufficient to conduct simulations of the flow in and around large arrays of turbines with fully resolved turbine geometries, the turbines' interaction with the energy resource needs to be parameterized, or modeled. Most models in use today, e.g. actuator disk, are not able to predict the unique wake structure generated by cross-flow turbines. Experiments were carried out using a high-resolution turbine test bed in a large cross-section tow tank, designed to achieve sufficiently high Reynolds numbers for the results to be Reynolds number independent with respect to turbine performance and wake statistics, such that they can be reliably extrapolated to full scale and used for model validation. To improve parameterization in array simulations, an actuator line model (ALM) was developed to provide a computationally feasible method for simulating full turbine arrays inside Navier--Stokes models. The ALM predicts turbine loading with the blade element method combined with sub-models for dynamic stall and flow curvature. The open-source software is written as an extension library for the OpenFOAM CFD package, which allows the ALM body force to be applied to their standard RANS and LES solvers. Turbine forcing is also applied to volume of fluid (VOF) models, e.g., for predicting free surface effects on submerged MHK devices. An additional sub-model is considered for injecting turbulence model scalar quantities based on actuator line element loading. Results are presented for the simulation of performance and wake dynamics of axial- and cross-flow turbines and compared with experiments and body-fitted mesh, blade-resolving CFD. Supported by NSF-CBET grant 1150797.

Patch Network for Power Allocation and Distribution in Smart Materials

NASA Technical Reports Server (NTRS)

Golembiewski, Walter T.

2000-01-01

The power allocation and distribution (PAD) circuitry is capable of allocating and distributing a single or multiple sources of power over multi-elements of a power user grid system. The purpose of this invention is to allocate and distribute power that is collected by individual patch rectennas to a region of specific power-user devices, such as actuators. The patch rectenna converts microwave power into DC power. Then this DC power is used to drive actuator devices. However, the power from patch rectennas is not sufficient to drive actuators unless all the collected power is effectively used to drive another group by allocation and distribution. The power allocation and distribution (PAD) circuitry solves the shortfall of power for devices in a large array. The PAD concept is based on the networked power control in which power collected over the whole array of rectennas is allocated to a sub domain where a group of devices is required to be activated for operation. Then the allocated power is distributed to individual element of power-devices in the sub domain according to a selected run-mode.

Numerical Modeling and Experimental Validation by Calorimetric Detection of Energetic Materials Using Thermal Bimorph Microcantilever Array: A Case Study on Sensing Vapors of Volatile Organic Compounds (VOCs)

PubMed Central

Kang, Seok-Won; Fragala, Joe; Banerjee, Debjyoti

2015-01-01

Bi-layer (Au-Si3N4) microcantilevers fabricated in an array were used to detect vapors of energetic materials such as explosives under ambient conditions. The changes in the bending response of each thermal bimorph (i.e., microcantilever) with changes in actuation currents were experimentally monitored by measuring the angle of the reflected ray from a laser source used to illuminate the gold nanocoating on the surface of silicon nitride microcantilevers in the absence and presence of a designated combustible species. Experiments were performed to determine the signature response of this nano-calorimeter platform for each explosive material considered for this study. Numerical modeling was performed to predict the bending response of the microcantilevers for various explosive materials, species concentrations, and actuation currents. The experimental validation of the numerical predictions demonstrated that in the presence of different explosive or combustible materials, the microcantilevers exhibited unique trends in their bending responses with increasing values of the actuation current. PMID:26334276

A review of micromirror arrays

DOE PAGES

Song, Yuanping; Panas, Robert M.; Hopkins, Jonathan B.

2017-08-30

The aim of this article is to provide a review of micromirror array (MMA) technologies (2631 MMA research papers and patents were reviewed for this effort). The performance capabilities of 277 MMA designs from 49 companies and 23 academic research groups are categorized and compared. The designs are categorized according to (i) their array’s dimension (e.g., 2D arrays consisting of mirrors that cover a surface, 1D arrays consisting of mirrors in a row, and 0D arrays consisting of only a single mirror), (ii) the nature of the surface of their mirrors (e.g., continuous or discrete), (iii) what combination of tip,more » tilt, and/or piston degrees of freedom (DOFs) they achieve, and (iv) how they are actuated. Standardized performance metrics that can be systematically applied to every MMA design (e.g., mirror area, fill factor, pitch, range of motion, maximum acceleration, actuator energy density, and number of uncontrolled DOFs) are defined and plotted for existing designs to enable their fair comparison. Theoretical bounds on what is physically possible for MMAs to achieve are also derived and depicted in these plots to highlight the amount of performance improvement that remains to be achieved by future designs and guidelines are provided to aid in the development of these future designs.« less

A review of micromirror arrays

DOE Office of Scientific and Technical Information (OSTI.GOV)

Song, Yuanping; Panas, Robert M.; Hopkins, Jonathan B.

The aim of this article is to provide a review of micromirror array (MMA) technologies (2631 MMA research papers and patents were reviewed for this effort). The performance capabilities of 277 MMA designs from 49 companies and 23 academic research groups are categorized and compared. The designs are categorized according to (i) their array’s dimension (e.g., 2D arrays consisting of mirrors that cover a surface, 1D arrays consisting of mirrors in a row, and 0D arrays consisting of only a single mirror), (ii) the nature of the surface of their mirrors (e.g., continuous or discrete), (iii) what combination of tip,more » tilt, and/or piston degrees of freedom (DOFs) they achieve, and (iv) how they are actuated. Standardized performance metrics that can be systematically applied to every MMA design (e.g., mirror area, fill factor, pitch, range of motion, maximum acceleration, actuator energy density, and number of uncontrolled DOFs) are defined and plotted for existing designs to enable their fair comparison. Theoretical bounds on what is physically possible for MMAs to achieve are also derived and depicted in these plots to highlight the amount of performance improvement that remains to be achieved by future designs and guidelines are provided to aid in the development of these future designs.« less

Chemical sensor with oscillating cantilevered probe

DOEpatents

Adams, Jesse D

2013-02-05

The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.

Metachronal wave of artificial cilia array actuated by applied magnetic field

NASA Astrophysics Data System (ADS)

Tsumori, Fujio; Marume, Ryuma; Saijou, Akinori; Kudo, Kentaro; Osada, Toshiko; Miura, Hideshi

2016-06-01

In this paper, a biomimetic microstructure related to cilia, which are effective fluidic and conveying systems in nature, is described. Authors have already reported that a magnetic elastomer pillar actuated by a rotating magnetic field can work like a natural cilium. In the present work, we show examples of a cilia array with a metachronal wave as the next step. A metachronal wave is a sequential action of a number of cilia. It is theoretically known that a metachronal wave gives a higher fluidic efficiency; however, there has been no report on a metachronal wave by artificial cilia. We prepared magnetic elastomer pillars that contain chainlike clusters of magnetic particles. The orientation of chains was set to be different in each pillar so that each pillar will deform with a different phase.

Thermal actuator improvements: tapering and folding

NASA Astrophysics Data System (ADS)

Sinclair, Michael J.; Wang, Kerwin

2003-04-01

Electrothermal actuation is not a popular technology for today"s MEMS transducers due to its relatively slow response and large appetite for power. The large displacement with high force and low voltage gives reason to try to improve thermal actuator"s operating characteristics. This paper describes some improvements to thermal actuators, mainly in increased output energy per actuator chip area and area utilization. The devices presented here are a variation of the chevron thermal actuator - one with two sets of thermally expanding beams pushing at a slight angle on either side of a suspended shuttle, causing it to be displaced parallel to the substrate. One improvement is to taper the thermal expansion beams so they exhibit a higher strain energy, allowing a larger thermal input power and hence more output mechanical power per beam. Another improvement is to move (fold) both sets of thermal beams to the same side of the shuttle so all are exerting force on the same side. The thermal expansion beams cause compression against the shuttle and work against one or two orthogonal cold beams in tension to produce an output force and displacement. This resembles a pseudo-bimorph array with the exception of having far fewer non-force-producing beams to bend.

Using Computational Fluid Dynamics and Experiments to Design Sweeping Jets for High Reynolds Number Cruise Configurations

NASA Technical Reports Server (NTRS)

Jones, Gregory S.; Milholen, William E., II; Fell, Jared S.; Webb, Sandy R.; Cagle, C. Mark

2016-01-01

The application of a sweeping jet actuator to a circulation control system was initiated by a risk reduction series of experiments to optimize the authority of a single sweeping jet actuator. The sweeping jet design was integrated into the existing Fundamental Aerodynamic Subsonic Transonic- Modular Active Control (FAST-MAC) model by replacing the steady blowing system with an array of thirty-nine sweeping jet cartridges. A constant slot height to wing chord ratio was similar to the steady blowing configuration resulting in each actuator having a unique in size for the sweeping jet configuration. While this paper will describe the scaling and optimization of the actuators for future high Reynolds number applications, the major focus of this effort was to target the transonic flight regime by increasing the amplitude authority of the actuator. This was accomplished by modifying the diffuser of the sweeping jet actuator, and this paper highlights twelve different diffuser designs. The experimental portion of this work was completed in the NASA Langley National Transonic Facility.

A Preliminary Investigation of Temperature Dependency of a Shape Memory Actuator with Time-Based Control in Aircraft Interiors

NASA Astrophysics Data System (ADS)

Otibar, Dennis; Weirich, Antonia; Kortenjann, Marcus; Kuhlenkötter, Bernd

2017-06-01

Shape memory alloys (SMA) possess an array of unique functional properties which are influenced by a complex interaction of different factors. Due to thermal sensitivity, slight changes in the environmental temperature may cause the properties to change significantly. This poses a huge challenge especially for the use of SMAs as actuators. The most common and elementary activation strategy of SMA actuators is based on the duration of activation and cooling with constant activation parameters. However, changing environmental influences cause the necessity to modify these parameters. This circumstance needs to be especially considered in the design process of actuator controls. This paper focuses on investigating the influence of environmental temperature changes on time-based activated SMA actuators. The results of the described experiments form the base for designing reactive control strategies for SMA actuators used in alternating environments. An example for application fields with changing environments and particularly changing temperatures are aircraft related implementations. This area also stands to benefit from the actuators’ advantages in ecological efficiency.

Precision Pointing in Space Using Arrays of Shape Memory Based Linear Actuators

NASA Astrophysics Data System (ADS)

Sonawane, Nikhil

Space systems such as communication satellites, earth observation satellites and telescope require accurate pointing to observe fixed targets over prolonged time. These systems typically use reaction wheels to slew the spacecraft and gimballing systems containing motors to achieve precise pointing. Motor based actuators have limited life as they contain moving parts that require lubrication in space. Alternate methods have utilized piezoelectric actuators. This paper presents Shape memory alloys (SMA) actuators for control of a deployable antenna placed on a satellite. The SMAs are operated as a series of distributed linear actuators. These distributed linear actuators are not prone to single point failures and although each individual actuator is imprecise due to hysteresis and temperature variation, the system as a whole achieves reliable results. The SMAs can be programmed to perform a series of periodic motion and operate as a mechanical guidance system that is not prone to damage from radiation or space weather. Efforts are focused on developing a system that can achieve 1 degree pointing accuracy at first, with an ultimate goal of achieving a few arc seconds accuracy. Bench top model of the actuator system has been developed and working towards testing the system under vacuum. A demonstration flight of the technology is planned aboard a CubeSat.

Fabrication and characterization of a micromachined swirl-shaped ionic polymer metal composite actuator with electrodes exhibiting asymmetric resistance.

PubMed

Feng, Guo-Hua; Liu, Kim-Min

2014-05-12

This paper presents a swirl-shaped microfeatured ionic polymer-metal composite (IPMC) actuator. A novel micromachining process was developed to fabricate an array of IPMC actuators on a glass substrate and to ensure that no shortcircuits occur between the electrodes of the actuator. We demonstrated a microfluidic scheme in which surface tension was used to construct swirl-shaped planar IPMC devices of microfeature size and investigated the flow velocity of Nafion solutions, which formed the backbone polymer of the actuator, within the microchannel. The unique fabrication process yielded top and bottom electrodes that exhibited asymmetric surface resistance. A tool for measuring surface resistance was developed and used to characterize the resistances of the electrodes for the fabricated IPMC device. The actuator, which featured asymmetric electrode resistance, caused a nonzero-bias current when the device was driven using a zero-bias square wave, and we propose a circuit model to describe this phenomenon. Moreover, we discovered and characterized a bending and rotating motion when the IPMC actuator was driven using a square wave. We observed a strain rate of 14.6% and a displacement of 700 μm in the direction perpendicular to the electrode surfaces during 4.5-V actuation.

Development of a non-explosive release actuator using shape memory alloy wire.

PubMed

Yoo, Young Ik; Jeong, Ju Won; Lim, Jae Hyuk; Kim, Kyung-Won; Hwang, Do-Soon; Lee, Jung Ju

2013-01-01

We have developed a newly designed non-explosive release actuator that can replace currently used release devices. The release mechanism is based on a separation mechanism, which relies on segmented nuts and a shape memory alloy (SMA) wire trigger. A quite fast and simple trigger operation is made possible through the use of SMA wire. This actuator is designed to allow a high preload with low levels of shock for the solar arrays of medium-size satellites. After actuation, the proposed device can be easily and instantly reset. Neither replacement, nor refurbishment of any components is necessary. According to the results of a performance test, the release time, preload capacity, and maximum shock level are 50 ms, 15 kN, and 350 G, respectively. In order to increase the reliability of the actuator, more than ten sets of performance tests are conducted. In addition, the proposed release actuator is tested under thermal vacuum and extreme vibration environments. No degradation or damage was observed during the two environment tests, and the release actuator was able to operate successfully. Considering the test results as a whole, we conclude that the proposed non-explosive release actuator can be applied reliably to intermediate-size satellites to replace existing release systems.

Fabrication and Characterization of a Micromachined Swirl-Shaped Ionic Polymer Metal Composite Actuator with Electrodes Exhibiting Asymmetric Resistance

PubMed Central

Feng, Guo-Hua; Liu, Kim-Min

2014-01-01

This paper presents a swirl-shaped microfeatured ionic polymer-metal composite (IPMC) actuator. A novel micromachining process was developed to fabricate an array of IPMC actuators on a glass substrate and to ensure that no shortcircuits occur between the electrodes of the actuator. We demonstrated a microfluidic scheme in which surface tension was used to construct swirl-shaped planar IPMC devices of microfeature size and investigated the flow velocity of Nafion solutions, which formed the backbone polymer of the actuator, within the microchannel. The unique fabrication process yielded top and bottom electrodes that exhibited asymmetric surface resistance. A tool for measuring surface resistance was developed and used to characterize the resistances of the electrodes for the fabricated IPMC device. The actuator, which featured asymmetric electrode resistance, caused a nonzero-bias current when the device was driven using a zero-bias square wave, and we propose a circuit model to describe this phenomenon. Moreover, we discovered and characterized a bending and rotating motion when the IPMC actuator was driven using a square wave. We observed a strain rate of 14.6% and a displacement of 700 μm in the direction perpendicular to the electrode surfaces during 4.5-V actuation. PMID:24824370

Quantitative Phase Microscopy for Accurate Characterization of Microlens Arrays

NASA Astrophysics Data System (ADS)

Grilli, Simonetta; Miccio, Lisa; Merola, Francesco; Finizio, Andrea; Paturzo, Melania; Coppola, Sara; Vespini, Veronica; Ferraro, Pietro

Microlens arrays are of fundamental importance in a wide variety of applications in optics and photonics. This chapter deals with an accurate digital holography-based characterization of both liquid and polymeric microlenses fabricated by an innovative pyro-electrowetting process. The actuation of liquid and polymeric films is obtained through the use of pyroelectric charges generated into polar dielectric lithium niobate crystals.

Microstereolithography: A Review

DTIC Science & Technology

2003-04-01

initiator Table I. Characteristics of the integral microstereolithography machines described by Bertsch, Chatwin and Loubere. b) Digital Micromirror ...DeviceTM as pattern generator The Digital Micromirror Device (DMDTM) produced by Texas Instruments, which is an array of micromirrors actuated by...feasibility of the technology, an array of micromirrors having a VGA resolution (640 x 480) was used in a first prototype developed to work with visible

Active Control of Low-Speed Fan Tonal Noise Using Actuators Mounted in Stator Vanes: Part III Results

NASA Technical Reports Server (NTRS)

Sutliff, Daniel L.; Remington, Paul J.; Walker, Bruce E.

2003-01-01

A test program to demonstrate simplification of Active Noise Control (ANC) systems relative to standard techniques was performed on the NASA Glenn Active Noise Control Fan from May through September 2001. The target mode was the m = 2 circumferential mode generated by the rotor-stator interaction at 2BPF. Seven radials (combined inlet and exhaust) were present at this condition. Several different error-sensing strategies were implemented. Integration of the error-sensors with passive treatment was investigated. These were: (i) an in-duct linear axial array, (ii) an induct steering array, (iii) a pylon-mounted array, and (iv) a near-field boom array. The effect of incorporating passive treatment was investigated as well as reducing the actuator count. These simplified systems were compared to a fully ANC specified system. Modal data acquired using the Rotating Rake are presented for a range of corrected fan rpm. Simplified control has been demonstrated to be possible but requires a well-known and dominant mode signature. The documented results here in are part III of a three-part series of reports with the same base title. Part I and II document the control system and error-sensing design and implementation.

Direct Intracochlear Acoustic Stimulation Using a PZT Microactuator.

PubMed

Luo, Chuan; Omelchenko, Irina; Manson, Robert; Robbins, Carol; Oesterle, Elizabeth C; Cao, Guo Zhong; Shen, I Y; Hume, Clifford R

2015-12-01

Combined electric and acoustic stimulation has proven to be an effective strategy to improve hearing in some cochlear implant users. We describe an acoustic microactuator to directly deliver stimuli to the perilymph in the scala tympani. The 800 µm by 800 µm actuator has a silicon diaphragm driven by a piezoelectric thin film (e.g., lead-zirconium-titanium oxide or PZT). This device could also be used as a component of a bimodal acoustic-electric electrode array. In the current study, we established a guinea pig model to test the actuator for its ability to deliver auditory signals to the cochlea in vivo. The actuator was placed through the round window of the cochlea. Auditory brainstem response (ABR) thresholds, peak latencies, and amplitude growth were calculated for an ear canal speaker versus the intracochlear actuator for tone burst stimuli at 4, 8, 16, and 24 kHz. An ABR was obtained after removal of the probe to assess loss of hearing related to the procedure. In some animals, the temporal bone was harvested for histologic analysis of cochlear damage. We show that the device is capable of stimulating ABRs in vivo with latencies and growth functions comparable to stimulation in the ear canal. Further experiments will be necessary to evaluate the efficiency and safety of this modality in long-term auditory stimulation and its ability to be integrated with conventional cochlear implant arrays. © The Author(s) 2015.

Transient adhesion in a non-fully detached contact.

PubMed

Liu, Zheyu; Lu, Hongyu; Zheng, Yelong; Tao, Dashuai; Meng, Yonggang; Tian, Yu

2018-04-18

Continuous approaching and detaching displacement usually occurs in an adhesion test. Here, we found a transient adhesion force at the end of a non-fully detached contact. This force occurred when the nominal detaching displacement was less than the traditional quasi-static theory predicted zero force point. The transient adhesion force was ascribed to interfacial adhesion hysteresis, which was caused by the cracking process of the contact and the deformation competition between the sphere and supporting spring. Results indicated that the testing of adhesion can be significantly affected by different combinations of stiffnesses of the contact objects and the supporting spring cantilever. This combination should be carefully designed in an adhesion test. All these results enabled increased understanding of the nature of adhesion and can guide the design of adhesive actuators.

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

PubMed Central

Abels, Claudio; Mastronardi, Vincenzo Mariano; Guido, Francesco; Dattoma, Tommaso; Qualtieri, Antonio; Megill, William M.; De Vittorio, Massimo; Rizzi, Francesco

2017-01-01

The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, SixNy/Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described. PMID:28489040

HF DBD plasma actuators for reduction of cylinder noise in flow

NASA Astrophysics Data System (ADS)

Kopiev, V. F.; Kazansky, P. N.; Kopiev, V. A.; Moralev, I. A.; Zaytsev, M. Yu

2017-11-01

Surface high frequency dielectric barrier discharge (HF DBD) was used to reduce flow-induced noise, radiated by circular cylinder in cross flow. Effect of HF DBD actuators is studied for flow velocity up to 80 m s-1 (Reynolds numbers up to 2.18 · 105), corresponding to the typical aircraft landing approach speed. Noise measurements were performed by microphone array in anechoic chamber; averaged flow parameters were studied by particle image velocimetry (PIV). Actuator was powered by high-frequency voltage in hundreds kHz range in steady or modulated mode with the modulation frequency of 0.3-20 kHz (Strouhal number St of 0.4 to 20). It is demonstrated that upstream directed plasma actuators are able to reduce the vortex noise of a cylinder by 10 dB. Noise reduction is accompanied by significant reorganization of the wake behind a cylinder, decreasing both wake width and turbulence level. The physical mechanism related to broadband noise control by HF DBD actuator is also discussed.

Bistable microelectromechanical actuator

DOEpatents

Fleming, James G.

1999-01-01

A bistable microelectromechanical (MEM) actuator is formed on a substrate and includes a stressed membrane of generally rectangular shape that upon release assumes a curvilinear cross-sectional shape due to attachment at a midpoint to a resilient member and at opposing edges to a pair of elongate supports. The stressed membrane can be electrostatically switched between a pair of mechanical states having mirror-image symmetry, with the MEM actuator remaining in a quiescent state after a programming voltage is removed. The bistable MEM actuator according to various embodiments of the present invention can be used to form a nonvolatile memory element, an optical modulator (with a pair of mirrors supported above the membrane and moving in synchronism as the membrane is switched), a switchable mirror (with a single mirror supported above the membrane at the midpoint thereof) and a latching relay (with a pair of contacts that open and close as the membrane is switched). Arrays of bistable MEM actuators can be formed for applications including nonvolatile memories, optical displays and optical computing.

Bistable microelectromechanical actuator

DOEpatents

Fleming, J.G.

1999-02-02

A bistable microelectromechanical (MEM) actuator is formed on a substrate and includes a stressed membrane of generally rectangular shape that upon release assumes a curvilinear cross-sectional shape due to attachment at a midpoint to a resilient member and at opposing edges to a pair of elongate supports. The stressed membrane can be electrostatically switched between a pair of mechanical states having mirror-image symmetry, with the MEM actuator remaining in a quiescent state after a programming voltage is removed. The bistable MEM actuator according to various embodiments of the present invention can be used to form a nonvolatile memory element, an optical modulator (with a pair of mirrors supported above the membrane and moving in synchronism as the membrane is switched), a switchable mirror (with a single mirror supported above the membrane at the midpoint thereof) and a latching relay (with a pair of contacts that open and close as the membrane is switched). Arrays of bistable MEM actuators can be formed for applications including nonvolatile memories, optical displays and optical computing. 49 figs.

Tuning the synchronization of a network of weakly coupled self-oscillating gels via capacitors.

PubMed

Fang, Yan; Yashin, Victor V; Dickerson, Samuel J; Balazs, Anna C

2018-05-01

We consider a network of coupled oscillating units, where each unit comprises a self-oscillating polymer gel undergoing the Belousov-Zhabotinsky (BZ) reaction and an overlaying piezoelectric (PZ) cantilever. Through chemo-mechano-electrical coupling, the oscillations of the networked BZ-PZ units achieve in-phase or anti-phase synchronization, enabling, for example, the storage of information within the system. Herein, we develop numerical and computational models to show that the introduction of capacitors into the BZ-PZ system enhances the dynamical behavior of the oscillating network by yielding additional stable synchronization modes. We specifically show that the capacitors lead to a redistribution of charge in the system and alteration of the force that the PZ cantilevers apply to the underlying gel. Hence, the capacitors modify the strength of the coupling between the oscillators in the network. We utilize a linear stability analysis to determine the phase behavior of BZ-PZ networks encompassing different capacitances, force polarities, and number of units and then verify our findings with numerical simulations. Thus, through analytical calculations and numerical simulations, we determine the impact of the capacitors on the existence of the synchronization modes, their stability, and the rate of synchronization within these complex dynamical systems. The findings from our study can be used to design robotic materials that harness the materials' intrinsic, responsive properties to perform such functions as sensing, actuation, and information storage.

Tuning the synchronization of a network of weakly coupled self-oscillating gels via capacitors

NASA Astrophysics Data System (ADS)

Fang, Yan; Yashin, Victor V.; Dickerson, Samuel J.; Balazs, Anna C.

2018-05-01

We consider a network of coupled oscillating units, where each unit comprises a self-oscillating polymer gel undergoing the Belousov-Zhabotinsky (BZ) reaction and an overlaying piezoelectric (PZ) cantilever. Through chemo-mechano-electrical coupling, the oscillations of the networked BZ-PZ units achieve in-phase or anti-phase synchronization, enabling, for example, the storage of information within the system. Herein, we develop numerical and computational models to show that the introduction of capacitors into the BZ-PZ system enhances the dynamical behavior of the oscillating network by yielding additional stable synchronization modes. We specifically show that the capacitors lead to a redistribution of charge in the system and alteration of the force that the PZ cantilevers apply to the underlying gel. Hence, the capacitors modify the strength of the coupling between the oscillators in the network. We utilize a linear stability analysis to determine the phase behavior of BZ-PZ networks encompassing different capacitances, force polarities, and number of units and then verify our findings with numerical simulations. Thus, through analytical calculations and numerical simulations, we determine the impact of the capacitors on the existence of the synchronization modes, their stability, and the rate of synchronization within these complex dynamical systems. The findings from our study can be used to design robotic materials that harness the materials' intrinsic, responsive properties to perform such functions as sensing, actuation, and information storage.

Piezoresistive position microsensors with ppm-accuracy

NASA Astrophysics Data System (ADS)

Stavrov, Vladimir; Shulev, Assen; Stavreva, Galina; Todorov, Vencislav

2015-05-01

In this article, the relation between position accuracy and the number of simultaneously measured values, such as coordinates, has been analyzed. Based on this, a conceptual layout of MEMS devices (microsensors) for multidimensional position monitoring comprising a single anchored and a single actuated part has been developed. Both parts are connected with a plurality of micromechanical flexures, and each flexure includes position detecting cantilevers. Microsensors having detecting cantilevers oriented in X and Y direction have been designed and prototyped. Experimentally measured results at characterization of 1D, 2D and 3D position microsensors are reported as well. Exploiting different flexure layouts, a travel range between 50μm and 1.8mm and sensors' sensitivity in the range between 30μV/μm and 5mV/μm@ 1V DC supply voltage have been demonstrated. A method for accurate calculation of all three Cartesian coordinates, based on measurement of at least three microsensors' signals has also been described. The analyses of experimental results prove the capability of position monitoring with ppm-(part per million) accuracy. The technology for fabrication of MEMS devices with sidewall embedded piezoresistors removes restrictions in strong improvement of their usability for position sensing with a high accuracy. The present study is, also a part of a common strategy for developing a novel MEMS-based platform for simultaneous accurate measurement of various physical values when they are transduced to a change of position.

Self-referenced silicon nitride array microring biosensor for toxin detection using glycans at visible wavelength

NASA Astrophysics Data System (ADS)

Ghasemi, Farshid; Eftekhar, Ali A.; Gottfried, David S.; Song, Xuezheng; Cummings, Richard D.; Adibi, Ali

2013-02-01

We report on application of on-chip referencing to improve the limit-of-detection (LOD) in compact silicon nitride (SiN) microring arrays. Microring resonators, fabricated by e-beam lithography and fluorine-based etching, are designed for visible wavelengths (656nm) and have a footprint of 20 x 20 μm. GM1 ganglioside is used as the specific ligand for recognition of Cholera Toxin Subunit B (CTB), with Ricinus Communis Agglutinin I (RCA I) as a negative control. Using micro-cantilever based printing less than 10 pL of glycan solution is consumed per microring. Real-time data on analyte binding is extracted from the shifts in resonance wavelengths of the microrings.

Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom

DOE Office of Scientific and Technical Information (OSTI.GOV)

Fleming, James G.

A microelectromechanical (MEM) apparatus is disclosed which includes a pair of tensile-stressed actuators suspending a platform above a substrate to tilt the platform relative to the substrate. A tensile stress built into the actuators initially tilts the platform when a sacrificial material used in fabrication of the MEM apparatus is removed. Further tilting of the platform can occur with a change in the ambient temperature about the MEM apparatus, or by applying a voltage to one or both of the tensile-stressed actuators. The MEM apparatus can be used to form a tiltable micromirror or an array of such devices, andmore » also has applications for thermal management within satellites.« less

Analysis and testing of a soft actuation system for segmented reflector articulation and isolation

NASA Technical Reports Server (NTRS)

Jandura, Louise; Agronin, Michael L.

1991-01-01

Segmented reflectors have been proposed for space-based applications such as optical communication and large-diameter telescopes. An actuation system for mirrors in a space-based segmented mirror array has been developed as part of the National Aeronautics and Space Administration-sponsored Precision Segmented Reflector program. The actuation system, called the Articulated Panel Module (APM), articulates a mirror panel in 3 degrees of freedom in the submicron regime, isolates the panel from structural motion, and simplifies space assembly of the mirrors to the reflector backup truss. A breadboard of the APM has been built and is described. Three-axis modeling, analysis, and testing of the breadboard is discussed.

Uncooled Cantilever Microbolometer Focal Plane Arrays with mK Temperature Resolution: Engineering Mechanics for the Next Generation

DTIC Science & Technology

2009-11-25

34Nanoindentation Stress-Strain Curves of Plasma Enhanced Chemical Vapor Deposited Silicon Oxide Thin Films," Thin Solid Films, 516 (8) (2008) 1941-1951. 9. S...1604. 5. Z. Cao* and X. Zhang, "Measurement of Stress-Strain Curves of PECVD Silicon Oxide Thin Films by Means of Nanoindentation," in Processing...Microsystems (Transducers 󈧋), Lyon, France, June 10-14, 2007. 9. Z. Cao* and X. Zhang, “Measurement of Stress-strain Curves of PECVD Silicon Oxide

Automated Seat Cushion for Pressure Ulcer Prevention Using Real-Time Mapping, Offloading, and Redistribution of Interface Pressure

DTIC Science & Technology

2016-10-01

testing as well as finite element simulation. Automation and control testing has been completed on a 5x5 array of bubble actuators to verify pressure...mechanical behavior at varying loads and internal pressures both by experimental testing as well as finite element simulation. Automation and control...A finite element (FE) model of the bubble actuator was developed in the commercial software ANSYS in order to determine the deformation of the

Bio-Inspired Flexible Cellular Actuating Systems

DTIC Science & Technology

2013-11-21

spline . 4) Finally, the control law does not require that a, b, or M be known for the purpose of regulation. We only need to know bounds on a and M to...would have to be modeled as plates rather than beams. Although several MAV wings do have aspect ratios smaller than 3 (such as the one built by the... spline fitting. Such an array of sensors is light and cheap enough to implement in a practical setting, and more so compared with a distributed actuation

Engineered skeletal muscle tissue for soft robotics: fabrication strategies, current applications, and future challenges.

PubMed

Duffy, Rebecca M; Feinberg, Adam W

2014-01-01

Skeletal muscle is a scalable actuator system used throughout nature from the millimeter to meter length scales and over a wide range of frequencies and force regimes. This adaptability has spurred interest in using engineered skeletal muscle to power soft robotics devices and in biotechnology and medical applications. However, the challenges to doing this are similar to those facing the tissue engineering and regenerative medicine fields; specifically, how do we translate our understanding of myogenesis in vivo to the engineering of muscle constructs in vitro to achieve functional integration with devices. To do this researchers are developing a number of ways to engineer the cellular microenvironment to guide skeletal muscle tissue formation. This includes understanding the role of substrate stiffness and the mechanical environment, engineering the spatial organization of biochemical and physical cues to guide muscle alignment, and developing bioreactors for mechanical and electrical conditioning. Examples of engineered skeletal muscle that can potentially be used in soft robotics include 2D cantilever-based skeletal muscle actuators and 3D skeletal muscle tissues engineered using scaffolds or directed self-organization. Integration into devices has led to basic muscle-powered devices such as grippers and pumps as well as more sophisticated muscle-powered soft robots that walk and swim. Looking forward, current, and future challenges include identifying the best source of muscle precursor cells to expand and differentiate into myotubes, replacing cardiomyocytes with skeletal muscle tissue as the bio-actuator of choice for soft robots, and vascularization and innervation to enable control and nourishment of larger muscle tissue constructs. © 2013 Wiley Periodicals, Inc.

Performance improvements of MOEMS-based diffractive arrays: address isolation and optical switching

NASA Astrophysics Data System (ADS)

Panaman, Ganesh; Madison, Seth; Sano, Michael; Castracane, James

2005-01-01

Micro-Opto-Electro-Mechanical Systems (MOEMS) have found a variety of applications in fields such as telecommunications, spectroscopy and display technology. MOEMS-based optical switching is currently under investigation for the increased flexibility that such devices provide for reconfiguration of the I/O network for inter-chip communication applications. This potential not only adds an additional degree of freedom for adjustment of transmitter/receiver links but also allows for fine alignment of individual channels in the network link. Further, this use of diffractive arrays for specific applications combines beam steering/adjustment capabilities with the inherent wavelength dependence of the diffractive approach for channel separation and de-multiplexing. Research and development has been concentrated on the progression from single MOEMS components to parallel arrays integrated with optical source arrays for a successful feasibility demonstration. Successful development of such an approach will have a major impact of the next generation communication protocols. This paper will focus on the current status of the MOEMS research program for Free Space Optical inter-chip communication at the College of NanoScale Science and Engineering, University at Albany-SUNY (CNSE). New versions of diffractive arrays stemming from the basic MEMS Compound Grating (MCG; patent #5,999,319) have been produced through various fabrication methods including the MUMPs process1. Most MEMS components relying on electrostatic actuation tend to require high actuation voltages (>20V) compared to the typical 5V levels prevalent in conventional integrated circuits. The specific goal is to yield improved performance while minimizing the power consumption of the components. Structural modifications through the variation in the ruling/electrode spacing distance and array wiring layout through individually addressable gratings have been studied to understand effects on the actuation voltage and cross talk, respectively. A detailed overview of the optical and mechanical properties will be included. Modeling results along with the mechanical and optical testing results have been detailed and compared with previously obtained results. Future work focuses on alternate material sets for a reduction in operational voltage, improvements in optical efficiency and technology demonstrators for verification of massively parallel I/O performance.

Measurement of Contractile Stress Generated by Cultured Rat Muscle on Silicon Cantilevers for Toxin Detection and Muscle Performance Enhancement

PubMed Central

Wilson, Kerry; Das, Mainak; Wahl, Kathryn J.; Colton, Richard J.; Hickman, James

2010-01-01

Background To date, biological components have been incorporated into MEMS devices to create cell-based sensors and assays, motors and actuators, and pumps. Bio-MEMS technologies present a unique opportunity to study fundamental biological processes at a level unrealized with previous methods. The capability to miniaturize analytical systems enables researchers to perform multiple experiments in parallel and with a high degree of control over experimental variables for high-content screening applications. Methodology/Principal Findings We have demonstrated a biological microelectromechanical system (BioMEMS) based on silicon cantilevers and an AFM detection system for studying the physiology and kinetics of myotubes derived from embryonic rat skeletal muscle. It was shown that it is possible to interrogate and observe muscle behavior in real time, as well as selectively stimulate the contraction of myotubes with the device. Stress generation of the tissue was estimated using a modification of Stoney's equation. Calculated stress values were in excellent agreement with previously published results for cultured myotubes, but not adult skeletal muscle. Other parameters such as time to peak tension (TPT), the time to half relaxation (½RT) were compared to the literature. It was observed that the myotubes grown on the BioMEMS device, while generating stress magnitudes comparable to those previously published, exhibited slower TPT and ½RT values. However, growth in an enhanced media increased these values. From these data it was concluded that the myotubes cultured on the cantilevers were of an embryonic phenotype. The system was also shown to be responsive to the application of a toxin, veratridine. Conclusions/Significance The device demonstrated here will provide a useful foundation for studying various aspects of muscle physiology and behavior in a controlled high-throughput manner as well as be useful for biosensor and drug discovery applications. PMID:20548775

Uncertainty-enabled design of electromagnetic reflectors with integrated shape control

NASA Astrophysics Data System (ADS)

Haque, Samiul; Kindrat, Laszlo P.; Zhang, Li; Mikheev, Vikenty; Kim, Daewa; Liu, Sijing; Chung, Jooyeon; Kuian, Mykhailo; Massad, Jordan E.; Smith, Ralph C.

2018-03-01

We implemented a computationally efficient model for a corner-supported, thin, rectangular, orthotropic polyvinylidene fluoride (PVDF) laminate membrane, actuated by a two-dimensional array of segmented electrodes. The laminate can be used as shape-controlled electromagnetic reflector and the model estimates the reflector's shape given an array of control voltages. In this paper, we describe a model to determine the shape of the laminate for a given distribution of control voltages. Then, we investigate the surface shape error and its sensitivity to the model parameters. Subsequently, we analyze the simulated deflection of the actuated bimorph using a Zernike polynomial decomposition. Finally, we provide a probabilistic description of reflector performance using statistical methods to quantify uncertainty. We make design recommendations for nominal parameter values and their tolerances based on optimization under uncertainty using multiple methods.

An air-coupled actuator array for active modal control of timpani

NASA Astrophysics Data System (ADS)

Rollow, Douglas; Sparrow, Victor W.; Swanson, David C.

2005-09-01

The timbral characteristics of kettledrums can be described by a modal formulation of the vibration of a thin, air-loaded membrane. Modification of the modal time history can be brought about with the use of a control system which has independent influence on each structural mode. By replacing the usual kettle with a shallow chamber and a planar array of piston sources, a modal controller is created when driving the sources in appropriate linear combinations. A theoretical formulation of active control of structural vibration by means of fluid-coupled actuators is expressed, and a Boundary Element simulation provides insight to the coupled modes, independence of control, and constraints due to the geometry of the chamber. Advantages and limitations of this type of control source to general problems in actively controlled musical instruments are explored.

FAME: freeform active mirror experiment

NASA Astrophysics Data System (ADS)

Aitink-Kroes, Gabby; Agócs, Tibor; Miller, Chris; Black, Martin; Farkas, Szigfrid; Lemared, Sabri; Bettonvil, Felix; Montgomery, David; Marcos, Michel; Jaskó, Attila; van Duffelen, Farian; Challita, Zalpha; Fok, Sandy; Kiaeerad, Fatemeh; Hugot, Emmanuel; Schnetler, Hermine; Venema, Lars

2016-07-01

FAME is a four-year project and part of the OPTICON/FP7 program that is aimed at providing a breakthrough component for future compact, wide field, high resolution imagers or spectrographs, based on both Freeform technology, and the flexibility and versatility of active systems. Due to the opening of a new parameter space in optical design, Freeform Optics are a revolution in imaging systems for a broad range of applications from high tech cameras to astronomy, via earth observation systems, drones and defense. Freeform mirrors are defined by a non-rotational symmetry of the surface shape, and the fact that the surface shape cannot be simply described by conicoids extensions, or off-axis conicoids. An extreme freeform surface is a significantly challenging optical surface, especially for UV/VIS/NIR diffraction limited instruments. The aim of the FAME effort is to use an extreme freeform mirror with standard optics in order to propose an integrated system solution for use in future instruments. The work done so far concentrated on identification of compact, fast, widefield optical designs working in the visible, with diffraction limited performance; optimization of the number of required actuators and their layout; the design of an active array to manipulate the face sheet, as well as the actuator design. In this paper we present the status of the demonstrator development, with focus on the different building blocks: an extreme freeform thin face sheet, the active array, a highly controllable thermal actuator array, and the metrology and control system.

Nanomechanics modeling of carbon nanotubes interacting with surfaces in various configurations

NASA Astrophysics Data System (ADS)

Wu, Yu-Chiao

Carbon nanotubes (CNTs) have been widely used as potential components in reported nanoelectromechanical (NEM) devices due to their excellent mechanical and electrical properties. This thesis models the experiments by the continuum mechanics in two distinct scenarios. In the first situation, measurements are made of CNT configurations after manipulations. Modeling is then used to determine the interfacial properties during the manipulation which led to the observed configuration. This technique is used to determine the shear stress between a SWNT bundle and other materials. During manipulation, a SWNT bundle slipped on two micro-cantilevers. According to the slack due to the slippage after testing and the device configuration, the shear stress between a SWNT bundle and other materials can be determined. In another model, the work of adhesion was determined on two accidentally fabricated devices. Through the configuration of two SWNT adhered bundles and the force-distance curves measured by an atomic force microscope (AFM), modeling was used to determine the work of adhesion between two bundles and the shear stress at the SWNT-substrate interface. In the second situation, modeling is used in a more traditional fashion to make theoretical predictions as to how a device will operate. Using this technique, the actuation mechanism of a single-trench SWNT-based switch was investigated. During the actuation, the deflection-induced tension causes the SWNT bundle to slip on both platforms and to be partially peeled from two side recessed electrodes. These effects produce a slack which reduces the threshold voltages subsequent to the first actuation. The result shows excellent agreement between the theory and the measurement. Furthermore, the operation of a double-trenched SWNT-based switch was investigated. A slack is produced in the 1st actuated trench region by the slip and peeling effects. This slack reduces the 2nd actuation voltage in the neighbor trench. Finally, the adhesive slip process at the SWNT-substrate interface was simulated. The result shows that the force for slip of a SWNT remains constant for lengths less than about 240 nm. Beyond that length, increasing the contact length causes increase the force for slippage. This phenomenon agrees well with reported experiments.

Micromachined fragment capturer for biomedical applications.

PubMed

Choi, Young-Soo; Lee, Dong-Weon

2011-11-01

Due to changes in modern diet, a form of heart disease called chronic total occlusion has become a serious disease to be treated as an emergency. In this study, we propose a micromachined capturer that is designed and fabricated to collect plaque fragments generated during surgery to remove the thrombus. The fragment capturer consists of a plastic body made by rapid prototyping, SU-8 mesh structures using MEMS techniques, and ionic polymer metal composite (IPMC) actuators. An array of IPMC actuators combined with the SU-8 net structure was optimized to effectively collect plaque fragments. The evaporation of solvent through the actuator's surface was prevented using a coating of SU-8 and polydimethylsiloxane thin film on the actuator. This approach improved the available operating time of the IPMC, which primarily depends on solvent loss. Our preliminary results demonstrate the possibility of using the capturer for biomedical applications. © 2011 American Institute of Physics

Acoustic actuation of in situ fabricated artificial cilia

NASA Astrophysics Data System (ADS)

Orbay, Sinem; Ozcelik, Adem; Bachman, Hunter; Huang, Tony Jun

2018-02-01

We present on-chip acoustic actuation of in situ fabricated artificial cilia. Arrays of cilia structures are UV polymerized inside a microfluidic channel using a photocurable polyethylene glycol (PEG) polymer solution and photomasks. During polymerization, cilia structures are attached to a silane treated glass surface inside the microchannel. Then, the cilia structures are actuated using acoustic vibrations at 4.6 kHz generated by piezo transducers. As a demonstration of a practical application, DI water and fluorescein dye solutions are mixed inside a microfluidic channel. Using pulses of acoustic excitations, and locally fabricated cilia structures within a certain region of the microchannel, a waveform of mixing behavior is obtained. This result illustrates one potential application wherein researchers can achieve spatiotemporal control of biological microenvironments in cell stimulation studies. These acoustically actuated, in situ fabricated, cilia structures can be used in many on-chip applications in biological, chemical and engineering studies.

Improving the Performance of Electrically Activated NiTi Shape Memory Actuators by Pre-Aging

NASA Astrophysics Data System (ADS)

Rathmann1, Christian; Fleczok1, Benjamin; Otibar1, Dennis; Kuhlenkötter, Bernd

2017-06-01

Shape memory alloys possess an array of unique functional properties which are influenced by a complex interaction of different factors. Due to thermal sensitivity, slight changes in temperature may cause the properties to change significantly. This poses a huge challenge especially for the use of shape memory alloys as actuators. The displacement is the key performance indicator, which has to be of equal or better quality compared to conventional actuators. One problem of shape memory alloys is the change in functional fatigue in the first cycles, which makes it rather difficult to design the actuator. Therefore, the reduction of this shakedown effect is crucial. For this reason, this paper investigates the effect of electrical heat treatment as a method for pre-aging. This topic has so far been little investigated so that the investigations focus on identifying important factors and effects by using the design of experiments.

Focus tunable device actuator based on ionic polymer metal composite

NASA Astrophysics Data System (ADS)

Zhang, Yi-Wei; Su, Guo-Dung J.

2015-09-01

IPMC (Ionic Polymer Metallic Composite) is a kind of electroactive polymer (EAP) which is used as an actuator because of its low driving voltage and small size. The mechanism of IPMC actuator is due to the ionic diffusion when the voltage gradient is applied. In this paper, the complex IPMC fabrication such as Ag-IPMC be further developed in this paper. The comparison of response time and tip bending displacement of Pt-IPMC and Ag-IPMC will also be presented. We also use the optimized IPMC as the lens actuator integrated with curvilinear microlens array, and use the 3D printer to make a simple module and spring stable system. We also used modeling software, ANSYS Workbench, to confirm the effect of spring system. Finally, we successfully drive the lens system in 200μm stroke under 2.5V driving voltage within 1 seconds, and the resonant frequency is approximately 500 Hz.

Fabrication of five-level ultraplanar micromirror arrays by flip-chip assembly

NASA Astrophysics Data System (ADS)

Michalicek, M. Adrian; Bright, Victor M.

2001-10-01

This paper reports a detailed study of the fabrication of various piston, torsion, and cantilever style micromirror arrays using a novel, simple, and inexpensive flip-chip assembly technique. Several rectangular and polar arrays were commercially prefabricated in the MUMPs process and then flip-chip bonded to form advanced micromirror arrays where adverse effects typically associated with surface micromachining were removed. These arrays were bonded by directly fusing the MUMPs gold layers with no complex preprocessing. The modules were assembled using a computer-controlled, custom-built flip-chip bonding machine. Topographically opposed bond pads were designed to correct for slight misalignment errors during bonding and typically result in less than 2 micrometers of lateral alignment error. Although flip-chip micromirror performance is briefly discussed, the means used to create these arrays is the focus of the paper. A detailed study of flip-chip process yield is presented which describes the primary failure mechanisms for flip-chip bonding. Studies of alignment tolerance, bonding force, stress concentration, module planarity, bonding machine calibration techniques, prefabrication errors, and release procedures are presented in relation to specific observations in process yield. Ultimately, the standard thermo-compression flip-chip assembly process remains a viable technique to develop highly complex prototypes of advanced micromirror arrays.

Flip-chip fabrication of integrated micromirror arrays using a novel latching off-chip hinge mechanism

NASA Astrophysics Data System (ADS)

Michalicek, M. Adrian; Bright, Victor M.

2001-10-01

This paper presents the design, fabrication, modeling, and testing of various arrays of cantilever micromirror devices integrated atop CMOS control electronics. The upper layers of the arrays are prefabricated in the MUMPs process and then flip-chip transferred to CMOS receiving modules using a novel latching off-chip hinge mechanism. This mechanism allows the micromirror arrays to be released, rotated off the edge of the host module and then bonded to the receiving module using a standard probe station. The hinge mechanism supports the arrays by tethers that are severed to free the arrays once bonded. The resulting devices are inherently planarized since the bottom of the first releasable MUMPs layer becomes the surface of the integrated mirror. The working devices are formed by mirror surfaces bonded to address electrodes fabricated above static memory cells on the CMOS module. These arrays demonstrate highly desirable features such as compatible address potentials, less than 2 nm of RMS roughness, approximately 1 micrometers of lateral position accuracy and the unique ability to metallize reflective surfaces without masking. Ultimately, the off-chip hinge mechanism enables very low-cost, simple, reliable, repeatable and accurate assembly of advanced MEMS and integrated microsystems without specialized equipment or complex procedures.

A novel alternating current multiple array electrothermal micropump for lab-on-a-chip applications.

PubMed

Salari, A; Navi, M; Dalton, C

2015-01-01

The AC electrothermal technique is very promising for biofluid micropumping, due to its ability to pump high conductivity fluids. However, compared to electroosmotic micropumps, a lack of high fluid flow is a disadvantage. In this paper, a novel AC multiple array electrothermal (MAET) micropump, utilizing multiple microelectrode arrays placed on the side-walls of the fluidic channel of the micropump, is introduced. Asymmetric coplanar microelectrodes are placed on all sides of the microfluidic channel, and are actuated in different phases: one, two opposing, two adjacent, three, or all sides at the same time. Micropumps with different combinations of side electrodes and cross sections are numerically investigated in this paper. The effect of the governing parameters with respect to thermal, fluidic, and electrical properties are studied and discussed. To verify the simulations, the AC MAET concept was then fabricated and experimentally tested. The resulted fluid flow achieved by the experiments showed good agreement with the corresponding simulations. The number of side electrode arrays and the actuation patterns were also found to greatly influence the micropump performance. This study shows that the new multiple array electrothermal micropump design can be used in a wide range of applications such as drug delivery and lab-on-a-chip, where high flow rate and high precision micropumping devices for high conductivity fluids are needed.

Modeling and measurement of electrostatic micromirror array fabricated with single-layer polysilicon micromachining technology

NASA Astrophysics Data System (ADS)

Min, Young-Hoon; Kim, Yong-Kweon

1998-09-01

A silicon based micro mirror array is a highly efficient component for use in optical applications as adaptive optical systems and optical correlators. Many types of micro mirror or micro mirror array have been studied and proposed in order to obtain the optimal performance according to their own purposes. A micro mirror array designed, fabricated and tested in this paper consists of 5 X 5 single layer polysilicon-based, electrostatically driven actuators. The micro mirror array for the optical phase modulation is made by using only two masks and can be driven independently by 25 channel circuits. About 6 (pi) phase modulation is obtained in He-Ne laser ((lambda) equals 633 nm) with 67% fill-factor. In this paper, the deflection characteristics of the actuators in controllable range were studied. The experimental results show that the deflection characteristics is much dependent upon a residual stress in flexure, the initial curvature of mirror due to stress gradient and an electrostatic force acted on other element except for mirror itself. The modeling results agree well with the experimental results. Also, it is important to fabricate a flat mirror that is not initially curved because the curved mirror brings a bad performance in optical use. Therefore, a new method to obtain the flat mirror by using the gold metallization in spite of the residual stress unbalance is proposed in this paper.

Study of Hydrokinetic Turbine Arrays with Large Eddy Simulation

NASA Astrophysics Data System (ADS)

Sale, Danny; Aliseda, Alberto

2014-11-01

Marine renewable energy is advancing towards commercialization, including electrical power generation from ocean, river, and tidal currents. The focus of this work is to develop numerical simulations capable of predicting the power generation potential of hydrokinetic turbine arrays-this includes analysis of unsteady and averaged flow fields, turbulence statistics, and unsteady loadings on turbine rotors and support structures due to interaction with rotor wakes and ambient turbulence. The governing equations of large-eddy-simulation (LES) are solved using a finite-volume method, and the presence of turbine blades are approximated by the actuator-line method in which hydrodynamic forces are projected to the flow field as a body force. The actuator-line approach captures helical wake formation including vortex shedding from individual blades, and the effects of drag and vorticity generation from the rough seabed surface are accounted for by wall-models. This LES framework was used to replicate a previous flume experiment consisting of three hydrokinetic turbines tested under various operating conditions and array layouts. Predictions of the power generation, velocity deficit and turbulence statistics in the wakes are compared between the LES and experimental datasets.

Vibrotactile display for mobile applications based on dielectric elastomer stack actuators

NASA Astrophysics Data System (ADS)

Matysek, Marc; Lotz, Peter; Flittner, Klaus; Schlaak, Helmut F.

2010-04-01

Dielectric elastomer stack actuators (DESA) offer the possibility to build actuator arrays at very high density. The driving voltage can be defined by the film thickness, ranging from 80 μm down to 5 μm and driving field strength of 30 V/μm. In this paper we present the development of a vibrotactile display based on multilayer technology. The display is used to present several operating conditions of a machine in form of haptic information to a human finger. As an example the design of a mp3-player interface is introduced. To build up an intuitive and user friendly interface several aspects of human haptic perception have to be considered. Using the results of preliminary user tests the interface is designed and an appropriate actuator layout is derived. Controlling these actuators is important because there are many possibilities to present different information, e.g. by varying the driving parameters. A built demonstrator is used to verify the concept: a high recognition rate of more than 90% validates the concept. A characterization of mechanical and electrical parameters proofs the suitability of dielectric elastomer stack actuators for the use in mobile applications.

Fast autonomous holographic adaptive optics

NASA Astrophysics Data System (ADS)

Andersen, G.

2010-07-01

We have created a new adaptive optics system using a holographic modal wavefront sensing method capable of autonomous (computer-free) closed-loop control of a MEMS deformable mirror. A multiplexed hologram is recorded using the maximum and minimum actuator positions on the deformable mirror as the "modes". On reconstruction, an input beam will be diffracted into pairs of focal spots - the ratio of particular pairs determines the absolute wavefront phase at a particular actuator location. The wavefront measurement is made using a fast, sensitive photo-detector array such as a multi-pixel photon counters. This information is then used to directly control each actuator in the MEMS DM without the need for any computer in the loop. We present initial results of a 32-actuator prototype device. We further demonstrate that being an all-optical, parallel processing scheme, the speed is independent of the number of actuators. In fact, the limitations on speed are ultimately determined by the maximum driving speed of the DM actuators themselves. Finally, being modal in nature, the system is largely insensitive to both obscuration and scintillation. This should make it ideal for laser beam transmission or imaging under highly turbulent conditions.

Separation Dynamics of Controlled Internal Flow in an Adverse Pressure Gradient

NASA Astrophysics Data System (ADS)

Peterson, C. J.; Vukasinovic, B.; Glezer, A.

2017-11-01

The effects of fluidic actuation on the dynamic evolution of aggressive internal flow separation is investigated at speeds up to M = 0.4 within a constant-width diffuser branching off of a primary flow duct. It is shown that a spanwise array of fluidic actuators upstream of the separation actively controls the flow constriction (and losses) within the diffuser and consequently the local pressure gradient at its entrance. The effectiveness of the actuation, as may be measured by the increased flow rate that is diverted through the diffuser, scales with its flow rate coefficient. In the presence of actuation (0.7% mass fraction), the mass flow rate in the primary duct increases by 10% while the fraction of the diverted mass flow rate in the diffuser increases by more than 45%. The flow dynamics near separation in the absence and presence of actuation are characterized using high speed particle image velocimetry and analyzed using proper orthogonal and spectral decompositions. In particular, the spectral contents of the incipient boundary layer separation are compared in the absence and presence of actuation with emphasis on the changes in local dynamics near separation as the characteristic cross stream scale of the boundary layer increases with separation delay.

Electrostatic polymer-based microdeformable mirror for adaptive optics

NASA Astrophysics Data System (ADS)

Zamkotsian, Frederic; Conedera, Veronique; Granier, Hugues; Liotard, Arnaud; Lanzoni, Patrick; Salvagnac, Ludovic; Fabre, Norbert; Camon, Henri

2007-02-01

Future adaptive optics (AO) systems require deformable mirrors with very challenging parameters, up to 250 000 actuators and inter-actuator spacing around 500 μm. MOEMS-based devices are promising for the development of a complete generation of new deformable mirrors. Our micro-deformable mirror (MDM) is based on an array of electrostatic actuators with attachments to a continuous mirror on top. The originality of our approach lies in the elaboration of layers made of polymer materials. Mirror layers and active actuators have been demonstrated. Based on the design of this actuator and our polymer process, realization of a complete polymer-MDM has been done using two process flows: the first involves exclusively polymer materials while the second uses SU8 polymer for structural layers and SiO II and sol-gel for sacrificial layers. The latest shows a better capability in order to produce completely released structures. The electrostatic force provides a non-linear actuation, while AO systems are based on linear matrices operations. Then, we have developed a dedicated 14-bit electronics in order to "linearize" the actuation, using a calibration and a sixth-order polynomial fitting strategy. The response is nearly perfect over our 3×3 MDM prototype with a standard deviation of 3.5 nm; the influence function of the central actuator has been measured. First evaluation on the cross non-linarities has also been studied on OKO mirror and a simple look-up table is sufficient for determining the location of each actuator whatever the locations of the neighbor actuators. Electrostatic MDM are particularly well suited for open-loop AO applications.

Testing system for ferromagnetic shape memory microactuators.

PubMed

Ganor, Y; Shilo, D; Messier, J; Shield, T W; James, R D

2007-07-01

Ferromagnetic shape memory alloys are a class of smart materials that exhibit a unique combination of large strains and fast response when exposed to magnetic field. Accordingly, these materials have significant potential in motion generation applications such as microactuators and sensors. This article presents a novel experimental system that measures the dynamic magnetomechanical behavior of microscale ferromagnetic shape memory specimens. The system is comprised of an alternating magnetic field generator (AMFG) and a mechanical loading and sensing system. The AMFG generates a dynamic magnetic field that periodically alternates between two orthogonal directions to facilitate martensitic variant switching and to remotely achieve a full magnetic actuation cycle, without the need of mechanical resetting mechanisms. Moreover, the AMFG is designed to produce a magnetic field that inhibits 180 degrees magnetization domain switching, which causes energy loss without strain generation. The mechanical loading and sensing system maintains a constant mechanical load on the measured specimen by means of a cantilever beam, while the displacement is optically monitored with a resolution of approximately 0.1 microm. Preliminary measurements using Ni(2)MnGa single crystal specimens, with a cross section of 100x100 microm(2), verified their large actuation strains and established their potential to become a material of great importance in microactuation technology.

Enhanced photomechanical response of a Ni-Ti shape memory alloy coated with polymer-based photothermal composites

NASA Astrophysics Data System (ADS)

Perez-Zúñiga, M. G.; Sánchez-Arévalo, F. M.; Hernández-Cordero, J.

2017-10-01

A simple way to enhance the activation of shape memory effects with light in a Ni-Ti alloy is demonstrated. Using polydimethylsiloxane-carbon nanopowder (PDMS+CNP) composites as coatings, the one-way shape memory effect (OWSME) of the alloy can be triggered using low power IR light from a laser diode. The PDMS+CNP coatings serve as photothermal materials capable to absorb light, and subsequently generate and dissipate heat in a highly efficient manner, thereby reducing the optical powers required for triggering the OWSME in the Ni-Ti alloy. Experimental results with a cantilever flexural test using both, bare Ni-Ti and coated samples, show that the PDMS+CNP coatings perform as thermal boosters, and therefore the temperatures required for phase transformation in the alloy can be readily obtained with low laser powers. It is also shown that the two-way shape memory effect (TWSME) can be set in the Ni-Ti alloy through cycling the TWSME by simply modulating the laser diode signal. This provides a simple means for training the material, yielding a light driven actuator capable to provide forces in the mN range. Hence, the use of photothermal coatings on Ni-Ti shape memory alloys may offer new possibilities for developing light-controlled smart actuators.

Compensator design for improved counterbalancing in high speed atomic force microscopy.

PubMed

Bozchalooi, I S; Youcef-Toumi, K; Burns, D J; Fantner, G E

2011-11-01

High speed atomic force microscopy can provide the possibility of many new scientific observations and applications ranging from nano-manufacturing to the study of biological processes. However, the limited imaging speed has been an imperative drawback of the atomic force microscopes. One of the main reasons behind this limitation is the excitation of the AFM dynamics at high scan speeds, severely undermining the reliability of the acquired images. In this research, we propose a piezo based, feedforward controlled, counter actuation mechanism to compensate for the excited out-of-plane scanner dynamics. For this purpose, the AFM controller output is properly filtered via a linear compensator and then applied to a counter actuating piezo. An effective algorithm for estimating the compensator parameters is developed. The information required for compensator design is extracted from the cantilever deflection signal, hence eliminating the need for any additional sensors. The proposed approach is implemented and experimentally evaluated on the dynamic response of a custom made AFM. It is further assessed by comparing the imaging performance of the AFM with and without the application of the proposed technique and in comparison with the conventional counterbalancing methodology. The experimental results substantiate the effectiveness of the method in significantly improving the imaging performance of AFM at high scan speeds. © 2011 American Institute of Physics

Compensator design for improved counterbalancing in high speed atomic force microscopy

PubMed Central

Bozchalooi, I. S.; Youcef-Toumi, K.; Burns, D. J.; Fantner, G. E.

2011-01-01

High speed atomic force microscopy can provide the possibility of many new scientific observations and applications ranging from nano-manufacturing to the study of biological processes. However, the limited imaging speed has been an imperative drawback of the atomic force microscopes. One of the main reasons behind this limitation is the excitation of the AFM dynamics at high scan speeds, severely undermining the reliability of the acquired images. In this research, we propose a piezo based, feedforward controlled, counter actuation mechanism to compensate for the excited out-of-plane scanner dynamics. For this purpose, the AFM controller output is properly filtered via a linear compensator and then applied to a counter actuating piezo. An effective algorithm for estimating the compensator parameters is developed. The information required for compensator design is extracted from the cantilever deflection signal, hence eliminating the need for any additional sensors. The proposed approach is implemented and experimentally evaluated on the dynamic response of a custom made AFM. It is further assessed by comparing the imaging performance of the AFM with and without the application of the proposed technique and in comparison with the conventional counterbalancing methodology. The experimental results substantiate the effectiveness of the method in significantly improving the imaging performance of AFM at high scan speeds. PMID:22128989

Compensator design for improved counterbalancing in high speed atomic force microscopy

NASA Astrophysics Data System (ADS)

Bozchalooi, I. S.; Youcef-Toumi, K.; Burns, D. J.; Fantner, G. E.

2011-11-01

High speed atomic force microscopy can provide the possibility of many new scientific observations and applications ranging from nano-manufacturing to the study of biological processes. However, the limited imaging speed has been an imperative drawback of the atomic force microscopes. One of the main reasons behind this limitation is the excitation of the AFM dynamics at high scan speeds, severely undermining the reliability of the acquired images. In this research, we propose a piezo based, feedforward controlled, counter actuation mechanism to compensate for the excited out-of-plane scanner dynamics. For this purpose, the AFM controller output is properly filtered via a linear compensator and then applied to a counter actuating piezo. An effective algorithm for estimating the compensator parameters is developed. The information required for compensator design is extracted from the cantilever deflection signal, hence eliminating the need for any additional sensors. The proposed approach is implemented and experimentally evaluated on the dynamic response of a custom made AFM. It is further assessed by comparing the imaging performance of the AFM with and without the application of the proposed technique and in comparison with the conventional counterbalancing methodology. The experimental results substantiate the effectiveness of the method in significantly improving the imaging performance of AFM at high scan speeds.

Direct Intracochlear Acoustic Stimulation Using a PZT Microactuator

PubMed Central

Luo, Chuan; Omelchenko, Irina; Manson, Robert; Robbins, Carol; Oesterle, Elizabeth C.; Cao, Guo Zhong; Hume, Clifford R.

2015-01-01

Combined electric and acoustic stimulation has proven to be an effective strategy to improve hearing in some cochlear implant users. We describe an acoustic microactuator to directly deliver stimuli to the perilymph in the scala tympani. The 800 µm by 800 µm actuator has a silicon diaphragm driven by a piezoelectric thin film (e.g., lead-zirconium-titanium oxide or PZT). This device could also be used as a component of a bimodal acoustic-electric electrode array. In the current study, we established a guinea pig model to test the actuator for its ability to deliver auditory signals to the cochlea in vivo. The actuator was placed through the round window of the cochlea. Auditory brainstem response (ABR) thresholds, peak latencies, and amplitude growth were calculated for an ear canal speaker versus the intracochlear actuator for tone burst stimuli at 4, 8, 16, and 24 kHz. An ABR was obtained after removal of the probe to assess loss of hearing related to the procedure. In some animals, the temporal bone was harvested for histologic analysis of cochlear damage. We show that the device is capable of stimulating ABRs in vivo with latencies and growth functions comparable to stimulation in the ear canal. Further experiments will be necessary to evaluate the efficiency and safety of this modality in long-term auditory stimulation and its ability to be integrated with conventional cochlear implant arrays. PMID:26631107

Thin, nearly wireless adaptive optical device

NASA Technical Reports Server (NTRS)

Knowles, Gareth (Inventor); Hughes, Eli (Inventor)

2008-01-01

A thin, nearly wireless adaptive optical device capable of dynamically modulating the shape of a mirror in real time to compensate for atmospheric distortions and/or variations along an optical material is provided. The device includes an optical layer, a substrate, at least one electronic circuit layer with nearly wireless architecture, an array of actuators, power electronic switches, a reactive force element, and a digital controller. Actuators are aligned so that each axis of expansion and contraction intersects both substrate and reactive force element. Electronics layer with nearly wireless architecture, power electronic switches, and digital controller are provided within a thin-film substrate. The size and weight of the adaptive optical device is solely dominated by the size of the actuator elements rather than by the power distribution system.

Thin, nearly wireless adaptive optical device

NASA Technical Reports Server (NTRS)

Knowles, Gareth (Inventor); Hughes, Eli (Inventor)

2007-01-01

A thin, nearly wireless adaptive optical device capable of dynamically modulating the shape of a mirror in real time to compensate for atmospheric distortions and/or variations along an optical material is provided. The device includes an optical layer, a substrate, at least one electronic circuit layer with nearly wireless architecture, an array of actuators, power electronic switches, a reactive force element, and a digital controller. Actuators are aligned so that each axis of expansion and contraction intersects both substrate and reactive force element. Electronics layer with nearly wireless architecture, power electronic switches, and digital controller are provided within a thin-film substrate. The size and weight of the adaptive optical device is solely dominated by the size of the actuator elements rather than by the power distribution system.

Thin nearly wireless adaptive optical device

NASA Technical Reports Server (NTRS)

Knowles, Gareth J. (Inventor); Hughes, Eli (Inventor)

2009-01-01

A thin nearly wireless adaptive optical device capable of dynamically modulating the shape of a mirror in real time to compensate for atmospheric distortions and/or variations along an optical material is provided. The device includes an optical layer, a substrate, at least one electronic circuit layer with nearly wireless architecture, an array of actuators, power electronic switches, a reactive force element, and a digital controller. Actuators are aligned so that each axis of expansion and contraction intersects both substrate and reactive force element. Electronics layer with nearly wireless architecture, power electronic switches, and digital controller are provided within a thin-film substrate. The size and weight of the adaptive optical device is solely dominated by the size of the actuator elements rather than by the power distribution system.

A Transdermal Drug Delivery System Based on LIGA Technology and Soft Lithography

NASA Astrophysics Data System (ADS)

Matteucci, Marco; Perennes, Frederic; Marmiroli, Benedetta; Di Fabrizio, Enzo

2007-01-01

This report presents a transdermal drug delivery system based on LIGA fabricated microparts. It is a portable device combining a magnetically actuated micro gear pump with a microneedle array. The fluidic behaviour of the system is analyzed in order to predict its performance according to the dimension of the microparts and then compared to experimental data. The manufacturing process of both micropump and microneedle array are described.

Micromirror Arrays for Adaptive Optics

DOE Office of Scientific and Technical Information (OSTI.GOV)

Carr, E.J.

The long-range goal of this project is to develop the optical and mechanical design of a micromirror array for adaptive optics that will meet the following criteria: flat mirror surface ({lambda}/20), high fill factor (> 95%), large stroke (5-10 {micro}m), and pixel size {approx}-200 {micro}m. This will be accomplished by optimizing the mirror surface and actuators independently and then combining them using bonding technologies that are currently being developed.

Study on the Weak Stress in Flexural MEMS Cantilever

NASA Astrophysics Data System (ADS)

Ge, Yuetao; Ren, Yan

2018-03-01

In order to design a better piezoresistive MEMS cantilever beam, especially for cantilever beams that will detect weak forces or will be subjected to weak forces, this paper uses study on the weak stress in flexural MEMS cantilever. The sensor design structure, divided into protective layer, piezoresistive layer, support layer. The protective layer is responsible for protecting the piezoresistive layer so that the varistor is insulated from the outside; the piezoresistive layer is used to make the varistor; the support layer forms the main part of the cantilever beam, the majority of the cantilever beam. This paper has some value for cantilever multilayer structure design and cantilever beam size design.

A Unique Self-Sensing, Self-Actuating AFM Probe at Higher Eigenmodes

PubMed Central

Wu, Zhichao; Guo, Tong; Tao, Ran; Liu, Leihua; Chen, Jinping; Fu, Xing; Hu, Xiaotang

2015-01-01

With its unique structure, the Akiyama probe is a type of tuning fork atomic force microscope probe. The long, soft cantilever makes it possible to measure soft samples in tapping mode. In this article, some characteristics of the probe at its second eigenmode are revealed by use of finite element analysis (FEA) and experiments in a standard atmosphere. Although the signal-to-noise ratio in this environment is not good enough, the 2 nm resolution and 0.09 Hz/nm sensitivity prove that the Akiyama probe can be used at its second eigenmode under FM non-contact mode or low amplitude FM tapping mode, which means that it is easy to change the measuring method from normal tapping to small amplitude tapping or non-contact mode with the same probe and equipment. PMID:26580619

Integrated dynamic analysis simulation of space stations with controllable solar array

NASA Technical Reports Server (NTRS)

Heinrichs, J. A.; Fee, J. J.

1972-01-01

A methodology is formulated and presented for the integrated structural dynamic analysis of space stations with controllable solar arrays and non-controllable appendages. The structural system flexibility characteristics are considered in the dynamic analysis by a synthesis technique whereby free-free space station modal coordinates and cantilever appendage coordinates are inertially coupled. A digital simulation of this analysis method is described and verified by comparison of interaction load solutions with other methods of solution. Motion equations are simulated for both the zero gravity and artificial gravity (spinning) orbital conditions. Closed loop controlling dynamics for both orientation control of the arrays and attitude control of the space station are provided in the simulation by various generic types of controlling systems. The capability of the simulation as a design tool is demonstrated by utilizing typical space station and solar array structural representations and a specific structural perturbing force. Response and interaction load solutions are presented for this structural configuration and indicate the importance of using an integrated type analysis for the predictions of structural interactions.

Polymeric Nanoelectrodes for Investigating Cellular Adhesion

NASA Astrophysics Data System (ADS)

Thapa, Prem; Paneru, Govind; Flanders, Bret

2011-03-01

Polyethylene dioxythiophene nano-filaments were grown on lithographic electrode arrays by the recently developed directed electrochemical nanowire assembly technique. These filaments are firmly attached to the electrode but are not attached to the glass substrate. Hence, they behave like cantilevered rods (with one free end). Individual cells of the slime mold Dictystolium discoideum initiate contact by extending pseudopods to the nanoelectrodes when cultured on the electrode arrays. Scanning electron micrographs of the interfaces show the contact area to be of the order of 0.1 μ m 2 . Confocal images reveal the focal adhesions in the cell-electrode contact region. Deflection of the nanoelectrode by an individual cell can be used to measure the force exerted by the cell. Recent results on this innovative force sensing approach will be discussed. NSF.

Sensor failure and multivariable control for airbreathing propulsion systems. Ph.D. Thesis - Dec. 1979 Final Report

NASA Technical Reports Server (NTRS)

Behbehani, K.

1980-01-01

A new sensor/actuator failure analysis technique for turbofan jet engines was developed. Three phases of failure analysis, namely detection, isolation, and accommodation are considered. Failure detection and isolation techniques are developed by utilizing the concept of Generalized Likelihood Ratio (GLR) tests. These techniques are applicable to both time varying and time invariant systems. Three GLR detectors are developed for: (1) hard-over sensor failure; (2) hard-over actuator failure; and (3) brief disturbances in the actuators. The probability distribution of the GLR detectors and the detectability of sensor/actuator failures are established. Failure type is determined by the maximum of the GLR detectors. Failure accommodation is accomplished by extending the Multivariable Nyquest Array (MNA) control design techniques to nonsquare system designs. The performance and effectiveness of the failure analysis technique are studied by applying the technique to a turbofan jet engine, namely the Quiet Clean Short Haul Experimental Engine (QCSEE). Single and multiple sensor/actuator failures in the QCSEE are simulated and analyzed and the effects of model degradation are studied.

Use of Plasma Actuators as a Moving-Wake Generator

NASA Technical Reports Server (NTRS)

Corke, Thomas C.; Thomas, Flint O.; Klapetzky Michael J.

2007-01-01

The work documented in this report tests the concept of using plasma actuators as a simple and easy way to generate a simulated moving-wake and the disturbances associated with it in turbines. This wake is caused by the blades of the upstream stages of the turbine. Two types of devices, one constructed of arrays of NACA 0018 airfoils, and the one constructed of flat plates were studied. The airfoils or plates were equipped with surface mounted dielectric barrier discharge (DBD) plasma actuators, which were used to generate flow disturbances resembling moving-wakes. CTA hot-wire anemometry and flow visualization using a smoke-wire were used to investigate the wake independence at various spacings and downstream locations. The flat plates were found to produce better results than the airfoils in creating large velocity fluctuations in the free-stream flow. Different dielectric materials, plasma actuator locations, leading edge contours, angles of attack and plate spacings were investigated, some with positive results. The magnitudes of the velocity fluctuations were found to be comparable to existing mechanical moving-wake generators, thus proving the feasibility of using plasma actuators as a moving-wake generator.

Acoustic Beam Forming Array Using Feedback-Controlled Microphones for Tuning and Self-Matching of Frequency Response

NASA Technical Reports Server (NTRS)

Radcliffe, Eliott (Inventor); Naguib, Ahmed (Inventor); Humphreys, Jr., William M. (Inventor)

2014-01-01

A feedback-controlled microphone includes a microphone body and a membrane operatively connected to the body. The membrane is configured to be initially deflected by acoustic pressure such that the initial deflection is characterized by a frequency response. The microphone also includes a sensor configured to detect the frequency response of the initial deflection and generate an output voltage indicative thereof. The microphone additionally includes a compensator in electric communication with the sensor and configured to establish a regulated voltage in response to the output voltage. Furthermore, the microphone includes an actuator in electric communication with the compensator, wherein the actuator is configured to secondarily deflect the membrane in opposition to the initial deflection such that the frequency response is adjusted. An acoustic beam forming microphone array including a plurality of the above feedback-controlled microphones is also disclosed.

MEMS Microshutter Arrays for James Webb Space Telescope

NASA Technical Reports Server (NTRS)

Li, Mary J.; Beamesderfer, Michael; Babu, Sachi; Bajikar, Sateesh; Ewin, Audrey; Franz, Dave; Hess, Larry; Hu, Ron; Jhabvala, Murzy; Kelly, Dan;

Analyte species and concentration identification using differentially functionalized microcantilever arrays and artificial neural networks

DOE Office of Scientific and Technical Information (OSTI.GOV)

Senesac, Larry R; Datskos, Panos G; Sepaniak, Michael J

2006-01-01

In the present work, we have performed analyte species and concentration identification using an array of ten differentially functionalized microcantilevers coupled with a back-propagation artificial neural network pattern recognition algorithm. The array consists of ten nanostructured silicon microcantilevers functionalized by polymeric and gas chromatography phases and macrocyclic receptors as spatially dense, differentially responding sensing layers for identification and quantitation of individual analyte(s) and their binary mixtures. The array response (i.e. cantilever bending) to analyte vapor was measured by an optical readout scheme and the responses were recorded for a selection of individual analytes as well as several binary mixtures. Anmore » artificial neural network (ANN) was designed and trained to recognize not only the individual analytes and binary mixtures, but also to determine the concentration of individual components in a mixture. To the best of our knowledge, ANNs have not been applied to microcantilever array responses previously to determine concentrations of individual analytes. The trained ANN correctly identified the eleven test analyte(s) as individual components, most with probabilities greater than 97%, whereas it did not misidentify an unknown (untrained) analyte. Demonstrated unique aspects of this work include an ability to measure binary mixtures and provide both qualitative (identification) and quantitative (concentration) information with array-ANN-based sensor methodologies.« less

Low-Frequency and Broadband Vibration Energy Harvesting Using Base-Mounted Piezoelectric Transducers.

PubMed

Koven, Robert; Mills, Matthew; Gale, Richard; Aksak, Burak

2017-11-01

Piezoelectric vibration energy harvesters often consist of a cantilevered beam composed of a support layer and one or two piezoelectric layers with a tip mass. While this configuration is advantageous for maximizing electromechanical coupling, the mechanical properties of the piezoelectric material can place limitations on harvester size and resonant frequency. Here, we present numerical and experimental results from a new type of piezoelectric energy harvester in which the mechanical properties and the resonant frequency of the cantilever beam resonator are effectively decoupled from the piezoelectric component. Referred to as a base-mounted piezoelectric (BMP) harvester in this paper, this new design features a piezoelectric transducer mounted beneath the base of the cantilevered beam resonator. The flexibility in the material choice for the cantilever beam resonator means that the resonant frequency and the beam dimensions are essentially free parameters. A prototype made with a 1.6 mm mm mm polyurethane beam, a PZT-5H piezoelectric transducer, and an 8.36-g tip mass is shown to produce an average power of 8.75 and at 45 Hz across a 13.0- load under harmonic base excitations of constant peak acceleration at 0.25 and 1.0-g, respectively. We also show an increase in full-width half-maximum bandwidth approximately from 1.5 to 5.6 Hz using an array of four individual BMP harvesters of similar dimensions with peak power generation of at 37.6 Hz across a 1.934- load at 0.25-g peak base excitation. Finite elements-based numerical simulations are shown to be in reasonable agreement with experimental results, indicating that the harvester behaves like a damped mass-spring system as proposed in this paper. Fabricated using casting and laser machining techniques, this harvester shows potential as a low-cost option for powering small, low-power wireless sensor nodes and other low-power devices.

The Dynamics of Controlled Flow Separation within a Diverter Duct Diffuser

NASA Astrophysics Data System (ADS)

Peterson, C. J.; Vukasinovic, B.; Glezer, A.

2016-11-01

The evolution and receptivity to fluidic actuation of the flow separation within a rectangular, constant-width, diffuser that is branched off of a primary channel is investigated experimentally at speeds up to M = 0.4. The coupling between the diffuser's adverse pressure gradient and the internal separation that constricts nearly half of the flow passage through the duct is controlled using a spanwise array of fluidic actuators on the surface upstream of the diffuser's inlet plane. The dynamics of the separating surface vorticity layer in the absence and presence of actuation are investigated using high-speed particle image velocimetry combined with surface pressure measurements and total pressure distributions at the primary channel's exit plane. It is shown that the actuation significantly alters the incipient dynamics of the separating vorticity layer as the characteristic cross stream scales of the boundary layer upstream of separation and of the ensuing vorticity concentrations within the separated flow increase progressively with actuation level. It is argued that the dissipative (high frequency) actuation alters the balance between large- and small-scale motions near separation by intensifying the large-scale motions and limiting the small-scale dynamics. Controlling separation within the diffuser duct also has a profound effect on the global flow. In the presence of actuation, the mass flow rate in the primary duct increases 10% while the fraction of the diverted mass flow rate in the diffuser increases by more than 45% at 0.7% actuation mass fraction. Supported by the Boeing Company.

Analysis of hybrid electric/thermofluidic inputs for wet shape memory alloy actuators

NASA Astrophysics Data System (ADS)

Flemming, Leslie; Mascaro, Stephen

2013-01-01

A wet shape memory alloy (SMA) actuator is characterized by an SMA wire embedded within a compliant fluid-filled tube. Heating and cooling of the SMA wire produces a linear contraction and extension of the wire. Thermal energy can be transferred to and from the wire using combinations of resistive heating and free/forced convection. This paper analyzes the speed and efficiency of a simulated wet SMA actuator using a variety of control strategies involving different combinations of electrical and thermofluidic inputs. A computational fluid dynamics (CFD) model is used in conjunction with a temperature-strain model of the SMA wire to simulate the thermal response of the wire and compute strains, contraction/extension times and efficiency. The simulations produce cycle rates of up to 5 Hz for electrical heating and fluidic cooling, and up to 2 Hz for fluidic heating and cooling. The simulated results demonstrate efficiencies up to 0.5% for electric heating and up to 0.2% for fluidic heating. Using both electric and fluidic inputs concurrently improves the speed and efficiency of the actuator and allows for the actuator to remain contracted without continually delivering energy to the actuator, because of the thermal capacitance of the hot fluid. The characterized speeds and efficiencies are key requirements for implementing broader research efforts involving the intelligent control of electric and thermofluidic networks to optimize the speed and efficiency of wet actuator arrays.

Performance enhancement of uncooled infrared focal plane array by integrating metamaterial absorber

DOE Office of Scientific and Technical Information (OSTI.GOV)

Ma, Wei; Wen, Yongzheng; Yu, Xiaomei, E-mail: yuxm@pku.edu.cn

2015-03-16

This letter presents an infrared (IR) focal plane array (FPA) with metamaterial absorber (MMA) integrated to enhance its performance. A glass substrate, on which arrays of bimaterial cantilevers are fabricated as the thermal-sensitive pixels by a polyimide surface sacrificial process, is employed to allow the optical readout from the back side of the substrate. Whereas the IR wave radiates onto the FPA from the front side, which consequently avoids the energy loss caused by the silicon substrate compared with the previous works. This structure also facilitates the integration of MMA by introducing a layer of periodic square resonators atop themore » SiN{sub x} structural layer to form a metal/dielectric/metal stack with the gold mirror functioning as the ground plane. A comparative experiment was carried out on the FPAs that use MMA and ordinary SiN{sub x} as the absorbers, respectively. The performance improvement was verified by the evaluation of the absorbers as well as the imaging results of both FPAs.« less

The 11th Aerospace Mechanisms Symposium

NASA Technical Reports Server (NTRS)

1977-01-01

Various mechanisms in aerospace engineering were presented at this conference. Specifications, design, and use of spacecraft and missile components are discussed, such as tail assemblies, radiometers, magnetormeters, pins, reaction wheels, ball bearings, actuators, mirrors, nutation dampers, airfoils, solar arrays, etc.

Vibration energy harvesting in a small channel fluid flow using piezoelectric transducer

DOE Office of Scientific and Technical Information (OSTI.GOV)

Hassan, Md. Mehedi, E-mail: buetmehedi10@gmail.com; Hossain, Md. Yeam, E-mail: yeamhossain@gmail.com; Mazumder, Rakib, E-mail: rakibmazumder46075@gmail.com

2016-07-12

This work is aimed at developing a way to harvest energy from a fluid stream with the application of piezoelectric transducers in a small channel. In this COMSOL Multiphysics based simulation study, it is attempted to harvest energy from the abundant renewable source of energy available in the form of kinetic energy of naturally occurring flow of fluids. The strategy involves harnessing energy from a fluid-actuator through generation of couples, eddies and vortices, resulting from the stagnation and separation of flow around a semi-circular bluff-body attached to a cantilever beam containing a piezoceramic layer. Fluctuation of fluidic pressure impulse onmore » the beam due to vortex shedding and varying lift forces causes the flexible cantilever beam to oscillate in the direction normal to the fluid flow in a periodic manner. The periodic application and release of a mechanical strain upon the beam effected a generation of electric potential within the piezoelectric layer, thus enabling extraction of electrical energy from the kinetic energy of the fluid. The piezoelectric material properties and transducer design are kept unchanged throughout the study, whereas the configuration is tested with different fluids and varying flow characteristics. The size and geometry of the obstructing entity are systematically varied to closely inspect the output from different iterations and for finding the optimum design parameters. The intermittent changes in the generated forces and subsequent variation in the strain on the beam are also monitored to find definitive relationship with the electrical energy output.« less

Acoustically enhanced boiling heat transfer on a heated surface containing open microchannels

NASA Astrophysics Data System (ADS)

Boziuk, Thomas R.; Smith, Marc K.; Glezer, Ari

2011-11-01

Acoustic actuation is used to enhance boiling heat transfer on a submerged heated surface containing an array of open microchannels by controlling the formation and evolution of vapor bubbles and inhibiting the instability that leads to film boiling at the critical heat flux. The effect of actuation at millimeter and micrometer scales is investigated with emphasis on the behavior of bubble nucleation, growth, contact-line motion, condensation, and detachment. The results show that microchannels control the location of boiling and reduce the mean surface superheat. In addition, acoustic actuation increases the heat flux at a given surface temperature and leads to a significant increase in the critical heat flux, a reduction of the vapor mass above the surface, and the breakup of low-frequency vapor slug formation. Supported by ONR.

Single Crystal DMs for Space-Based Observatories

NASA Astrophysics Data System (ADS)

Bierden, Paul

We propose to demonstrate the feasibility of a new manufacturing process for large aperture, high-actuator count microelectromechanical deformable mirrors (MEMS-DMs). These DMs are designed to fill a critical technology gap in NASA s plan for high- contrast space-based exoplanet observatories. We will manufacture a prototype DM with a continuous mirror facesheet, having an active aperture of 50mm diameter, supported by 2040 electrostatic actuators (50 across the diameter of the active aperture), spaced at a pitch of 1mm. The DM will be manufactured using silicon microfabrication tools. The strategic motivation for the proposed project is to advance MEMS DMs as an enabling technology in NASA s rapidly emerging program for extrasolar planet exploration. That goal is supported by an Astro2010 white paper on Technologies for Direct Optical Imaging of Exoplanets, which concluded that DMs are a critical component for all proposed internal coronagraph instrument concepts. That white paper pointed to great strides made by DM developers in the past decade, and acknowledged the components made by Boston Micromachines Corporation to be the most notable MEMS-based technology option. The principal manufacturing innovation in this project will be assembly of the DM through fusion bonding of three separate single crystal silicon wafers comprising the device s substrate, actuator array, and facesheet. The most significant challenge of this project will be to develop processes that allow reliable fusion bonds between multiple compliant silicon layers while yielding an optically flat surface and a robust electromechanical system. The compliance of the DM, which is required for its electromechanical function, will make it challenging to achieve the intimate, planar contact that is generally needed for success in fusion bonding. The manufacturing approach will use photolithography and reactive ion etching to pattern structural layers. Three wafer-scale devices will be patterned and etched independently: one for the substrate and fixed electrode layer, one for the actuator layer, and one for the mirror layer. Subsequently, each of these wafers will be bonded through a thermal fusion process to the others. In an innovative new processing technique, we will employ sacrificial oxide pillars to add temporary support to the otherwise compliant device structures. These pillars will be dissolved after assembly. The result will be a stress-free, single crystal silicon device with broadly expanded design space for geometric parameters such as actuator pitch, mirror diameter, array size, and actuator gap. Consequently, this approach will allow us to make devices with characteristics that are needed for some important NASA applications in space-based coronography, especially where larger array sizes, greater actuator pitch, and better optical surface quality are needed. The significance of this work is that it will provide a technology platform that meets or exceeds the superb optical performance that has been demonstrated in conventional pizezoelectrically actuated DMs, while retaining the advantages in cost, repeatability, and thermal insensitivity that have been demonstrated in the newer generation of MEMS electrostatically actuated DMs. The shift to bonded single-crystal structures will eliminate the single biggest drawback in previously reported NASA-fielded MEMS DM technology: device susceptibility to stress-induced scalloping and print through artifacts resulting from polycrystalline thin film surface micromachining. With single crystal structures bonded at atomic scales, uncorrected surface topography can be controlled to subnanometer levels, enabling the advancement of NASA s next-generation space-based coronagraphs.

A hybrid analog-digital phase-locked loop for frequency mode non-contact scanning probe microscopy.

PubMed

Mehta, M M; Chandrasekhar, V

2014-01-01

Non-contact scanning probe microscopy (SPM) has developed into a powerful technique to image many different properties of samples. The conventional method involves monitoring the amplitude, phase, or frequency of a cantilever oscillating at or near its resonant frequency as it is scanned across the surface of a sample. For high Q factor cantilevers, monitoring the resonant frequency is the preferred method in order to obtain reasonable scan times. This can be done by using a phase-locked-loop (PLL). PLLs can be obtained as commercial integrated circuits, but these do not have the frequency resolution required for SPM. To increase the resolution, all-digital PLLs requiring sophisticated digital signal processors or field programmable gate arrays have also been implemented. We describe here a hybrid analog/digital PLL where most of the components are implemented using discrete analog integrated circuits, but the frequency resolution is provided by a direct digital synthesis chip controlled by a simple peripheral interface controller (PIC) microcontroller. The PLL has excellent frequency resolution and noise, and can be controlled and read by a computer via a universal serial bus connection.

A hybrid analog-digital phase-locked loop for frequency mode non-contact scanning probe microscopy

NASA Astrophysics Data System (ADS)

Mehta, M. M.; Chandrasekhar, V.

2014-01-01

Non-contact scanning probe microscopy (SPM) has developed into a powerful technique to image many different properties of samples. The conventional method involves monitoring the amplitude, phase, or frequency of a cantilever oscillating at or near its resonant frequency as it is scanned across the surface of a sample. For high Q factor cantilevers, monitoring the resonant frequency is the preferred method in order to obtain reasonable scan times. This can be done by using a phase-locked-loop (PLL). PLLs can be obtained as commercial integrated circuits, but these do not have the frequency resolution required for SPM. To increase the resolution, all-digital PLLs requiring sophisticated digital signal processors or field programmable gate arrays have also been implemented. We describe here a hybrid analog/digital PLL where most of the components are implemented using discrete analog integrated circuits, but the frequency resolution is provided by a direct digital synthesis chip controlled by a simple peripheral interface controller (PIC) microcontroller. The PLL has excellent frequency resolution and noise, and can be controlled and read by a computer via a universal serial bus connection.

Nonlinear analysis of thermally and electrically actuated functionally graded material microbeam.

PubMed

Li, Yingli; Meguid, S A; Fu, Yiming; Xu, Daolin

2014-02-08

In this paper, we provide a unified and self-consistent treatment of a functionally graded material (FGM) microbeam with varying thermal conductivity subjected to non-uniform or uniform temperature field. Specifically, it is our objective to determine the effect of the microscopic size of the beam, the electrostatic gap, the temperature field and material property on the pull-in voltage of the microbeam under different boundary conditions. The non-uniform temperature field is obtained by integrating the steady-state heat conduction equation. The governing equations account for the microbeam size by introducing an internal material length-scale parameter that is based on the modified couple stress theory. Furthermore, it takes into account Casimir and van der Waals forces, and the associated electrostatic force with the first-order fringing field effects. The resulting nonlinear differential equations were converted to a coupled system of algebraic equations using the differential quadrature method. The outcome of our work shows the dramatic effect and dependence of the pull-in voltage of the FGM microbeam upon the temperature field, its gradient for a given boundary condition. Specifically, both uniform and non-uniform thermal loading can actuate the FGM microbeam even without an applied voltage. Our work also reveals that the non-uniform temperature field is more effective than the uniform temperature field in actuating a FGM cantilever-type microbeam. For the clamped-clamped case, care must be taken to account for the effective use of thermal loading in the design of microbeams. It is also observed that uniform thermal loading will lead to a reduction in the pull-in voltage of a FGM microbeam for all the three boundary conditions considered.

Digitally controlled droplet microfluidic system based on electrophoretic actuation

NASA Astrophysics Data System (ADS)

Im, Do Jin; Yoo, Byeong Sun; Ahn, Myung Mo; Moon, Dustin; Kang, In Seok

2012-11-01

Most researches on direct charging and the subsequent manipulation of a charged droplet were focused on an on-demand sorting in microchannel where carrier fluid transports droplets. Only recently, an individual actuation of a droplet without microchannel and carrier fluid was tried. However, in the previous work, the system size was too large and the actuation voltage was too high (1.5 kV), which limits the applicability of the technology to mobile use. Therefore, in the current research, we have developed a miniaturized digital microfluidic system based on the electrophoresis of a charged droplet (ECD). By using a pin header socket for an array of electrodes, much smaller microfluidic system can be made from simple fabrication process with low cost. A full two dimensional manipulation (0.4 cm/s) of a droplet (300 nL) suspended in silicone oil (6 cSt) and multiple droplet actuation have been performed with reasonable actuation voltage (300 V). By multiple droplet actuation and coalescence, a practical biochemical application also has been demonstrated. We hope the current droplet manipulation method (ECD) can be a good alternative or complimentary technology to the conventional ones and therefore contributes to the development of droplet microfluidics. This work has been supported by BK21 program of the Ministry of Education, Science and Technology (MEST) of Korea.

Wireless actuation with functional acoustic surfaces

NASA Astrophysics Data System (ADS)

Qiu, T.; Palagi, S.; Mark, A. G.; Melde, K.; Adams, F.; Fischer, P.

2016-11-01

Miniaturization calls for micro-actuators that can be powered wirelessly and addressed individually. Here, we develop functional surfaces consisting of arrays of acoustically resonant micro-cavities, and we demonstrate their application as two-dimensional wireless actuators. When remotely powered by an acoustic field, the surfaces provide highly directional propulsive forces in fluids through acoustic streaming. A maximal force of ˜0.45 mN is measured on a 4 × 4 mm2 functional surface. The response of the surfaces with bubbles of different sizes is characterized experimentally. This shows a marked peak around the micro-bubbles' resonance frequency, as estimated by both an analytical model and numerical simulations. The strong frequency dependence can be exploited to address different surfaces with different acoustic frequencies, thus achieving wireless actuation with multiple degrees of freedom. The use of the functional surfaces as wireless ready-to-attach actuators is demonstrated by implementing a wireless and bidirectional miniaturized rotary motor, which is 2.6 × 2.6 × 5 mm3 in size and generates a stall torque of ˜0.5 mN.mm. The adoption of micro-structured surfaces as wireless actuators opens new possibilities in the development of miniaturized devices and tools for fluidic environments that are accessible by low intensity ultrasound fields.

Compact and low-cost humanoid hand powered by nylon artificial muscles.

PubMed

Wu, Lianjun; Jung de Andrade, Monica; Saharan, Lokesh Kumar; Rome, Richard Steven; Baughman, Ray H; Tadesse, Yonas

2017-02-03

This paper focuses on design, fabrication and characterization of a biomimetic, compact, low-cost and lightweight 3D printed humanoid hand (TCP Hand) that is actuated by twisted and coiled polymeric (TCP) artificial muscles. The TCP muscles were recently introduced and provided unprecedented strain, mechanical work, and lifecycle (Haines et al 2014 Science 343 868-72). The five-fingered humanoid hand is under-actuated and has 16 degrees of freedom (DOF) in total (15 for fingers and 1 at the palm). In the under-actuated hand designs, a single actuator provides coupled motions at the phalanges of each finger. Two different designs are presented along with the essential elements consisting of actuators, springs, tendons and guide systems. Experiments were conducted to investigate the performance of the TCP muscles in response to the power input (power magnitude, type of wave form such as pulsed or square wave, and pulse duration) and the resulting actuation stroke and force generation. A kinematic model of the flexor tendons was developed to simulate the flexion motion and compare with experimental results. For fast finger movements, short high-power pulses were employed. Finally, we demonstrated the grasping of various objects using the humanoid TCP hand showing an array of functions similar to a natural hand.

Holographic Adaptive Laser Optics System

NASA Astrophysics Data System (ADS)

Andersen, G.; Ghebremichael, F.

2011-09-01

We have created a new adaptive optics system using a holographic modal wavefront sensing method with the autonomous (computer-free) closed-loop control of a MEMS deformable mirror (DM). A multiplexed hologram is recorded using the maximum and minimum actuator positions on the deformable mirror as the “modes”. On reconstruction, an input beam is diffracted into pairs of focal spots and the ratio of the intensities of certain pairs determines the absolute wavefront phase at a particular actuator location. The wavefront measurement is made using fast, sensitive silicon photomultiplier arrays with the parallel outputs directly controlling individual actuators in the MEMS DM. In this talk, we will present the results from an all-optical, ultra-compact system that runs in closed-loop without the need for a computer. The speed is limited only by the response time of any given DM actuator and not the number of actuators. In our case, our 32-actuator prototype device already operates at 10 kHz and our next generation system is being designed for > 100 kHz. As a modal system, it is largely insensitive to scintillation and obscuration and is thus ideal for extreme adaptive optics applications. We will present information on how HALOS can be used for image correction and beam propagation as well as several other novel applications.

Superconductivity Devices: Commercial Use of Space

NASA Technical Reports Server (NTRS)

Haertling, Gene (Principal Investigator); Furman, Eugene; Li, Guang

1996-01-01

The work described in this report covers various aspects of the Rainbow solid-state actuator and sensor technologies. It is presented in five parts dealing with sensor applications, nonlinear properties, stress-optic and electrooptic properties, stacks and arrays, and publications. The Rainbow actuator technology is a relatively new materials development which had its inception in 1992. It involves a new processing technique for preparing pre-stressed, high lead containing piezoelectric and electrostrictive ceramic materials. Ceramics fabricated by this method produce bending-mode actuator devices which possess several times more displacement and load bearing capacity than present-day benders. Since they can also be used in sensor applications, Rainbows are part of the family of materials known as smart ceramics. During this period, PLZT Rainbow ceramics were characterized with respect to their piezoelectric properties for potential use in stress sensor applications. Studies of the nonlinear and stress-optic/electrooptic birefringent properties were also initiated during this period. Various means for increasing the utility of stress-enhanced Rainbow actuators are presently under investigation.

Numerical Simulation of a High-Lift Configuration with Embedded Fluidic Actuators

NASA Technical Reports Server (NTRS)

Vatsa, Veer N.; Casalino, Damiano; Lin, John C.; Appelbaum, Jason

2014-01-01

Numerical simulations have been performed for a vertical tail configuration with deflected rudder. The suction surface of the main element of this configuration is embedded with an array of 32 fluidic actuators that produce oscillating sweeping jets. Such oscillating jets have been found to be very effective for flow control applications in the past. In the current paper, a high-fidelity computational fluid dynamics (CFD) code known as the PowerFLOW(Registered TradeMark) code is used to simulate the entire flow field associated with this configuration, including the flow inside the actuators. The computed results for the surface pressure and integrated forces compare favorably with measured data. In addition, numerical solutions predict the correct trends in forces with active flow control compared to the no control case. Effect of varying yaw and rudder deflection angles are also presented. In addition, computations have been performed at a higher Reynolds number to assess the performance of fluidic actuators at flight conditions.

Buckligami: Actuation of soft structures through mechanical instabilities

NASA Astrophysics Data System (ADS)

Lazarus, Arnaud; Reis, Pedro

2013-03-01

We present a novel mechanism for actuating soft structures, that is triggered through buckling. Our elastomeric samples are rapid-prototyped using digital fabrication and comprise of a cylindrical shell patterned with an array of voids, each of which is covered by a thin membrane. Decreasing the internal pressure of the structure induces local buckling of the ligaments of the pattern, resulting in controllable folding of the global structure. Using rigid inclusions to plug the voids in specific geometric arrangements allows us to excite a variety of different fundamental motions of the cylindrical shell, including flexure and twist. We refer to this new mechanism of buckling-induced folding as ``buckligami.'' Given that geometry, elasticity and buckling are the underlying ingredients of this local folding mechanism, the global actuation is scalable, reversible and repeatable. Characterization and rationalization of our experiments provide crucial fundamental understanding to aid the design of new scale-independent actuators, with potential implications in the field of soft robotics.

2D stepping drive for hyperspectral systems

NASA Astrophysics Data System (ADS)

Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Sinzinger, Stefan; Hoffmann, Martin

2015-07-01

We present the design, fabrication and characterization of a compact 2D stepping microdrive for pinhole array positioning. The miniaturized solution enables a highly integrated compact hyperspectral imaging system. Based on the geometry of the pinhole array, an inch-worm drive with electrostatic actuators was designed resulting in a compact (1 cm2) positioning system featuring a step size of about 15 µm in a 170 µm displacement range. The high payload (20 mg) as required for the pinhole array and the compact system design exceed the known electrostatic inch-worm-based microdrives.

Bifurcation, chaos, and scan instability in dynamic atomic force microscopy

DOE Office of Scientific and Technical Information (OSTI.GOV)

Cantrell, John H., E-mail: john.h.cantrell@nasa.gov; Cantrell, Sean A., E-mail: scantrell@nlsanalytics.com

The dynamical motion at any point on the cantilever of an atomic force microscope can be expressed quite generally as a superposition of simple harmonic oscillators corresponding to the vibrational modes allowed by the cantilever shape. Central to the dynamical equations is the representation of the cantilever-sample interaction force as a polynomial expansion with coefficients that account for the interaction force “stiffness,” the cantilever-to-sample energy transfer, and the displacement amplitude of cantilever oscillation. Renormalization of the cantilever beam model shows that for a given cantilever drive frequency cantilever dynamics can be accurately represented by a single nonlinear mass-spring model withmore » frequency-dependent stiffness and damping coefficients [S. A. Cantrell and J. H. Cantrell, J. Appl. Phys. 110, 094314 (2011)]. Application of the Melnikov method to the renormalized dynamical equation is shown to predict a cascade of period doubling bifurcations with increasing cantilever drive force that terminates in chaos. The threshold value of the drive force necessary to initiate bifurcation is shown to depend strongly on the cantilever setpoint and drive frequency, effective damping coefficient, nonlinearity of the cantilever-sample interaction force, and the displacement amplitude of cantilever oscillation. The model predicts the experimentally observed interruptions of the bifurcation cascade for cantilevers of sufficiently large stiffness. Operational factors leading to the loss of image quality in dynamic atomic force microscopy are addressed, and guidelines for optimizing scan stability are proposed using a quantitative analysis based on system dynamical parameters and choice of feedback loop parameter.« less

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

NASA Astrophysics Data System (ADS)

Mathew, Ribu; Ravi Sankar, A.

2018-06-01

In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.[Figure not available: see fulltext.

Simulating wind and marine hydrokinetic turbines with actuator lines in RANS and LES

NASA Astrophysics Data System (ADS)

Bachant, Peter; Wosnik, Martin

2015-11-01

As wind and marine hydrokinetic (MHK) turbine designs mature, focus is shifting towards improving turbine array layouts for maximizing overall power output, i.e., minimizing wake interference for axial-flow or horizontal-axis turbines, or taking advantage of constructive wake interaction for cross-flow or vertical-axis turbines. Towards this goal, an actuator line model (ALM) was developed to provide a computationally feasible method for simulating full turbine arrays inside Navier-Stokes models. The ALM predicts turbine loading with the blade element method combined with sub-models for dynamic stall and flow curvature. The open-source software is written as an extension library for the OpenFOAM CFD package, which allows the ALM body force to be applied to their standard RANS and LES solvers. Turbine forcing is also applied to volume of fluid (VOF) models, e.g., for predicting free surface effects on submerged MHK devices. An additional sub-model is considered for injecting turbulence model scalar quantities based on actuator line element loading. Results are presented for the simulation of performance and wake dynamics of axial- and cross-flow turbines and compared with moderate Reynolds number experiments and body-fitted mesh, blade-resolving CFD. Work supported by NSF-CBET grant 1150797.

Condenser for photolithography system

DOEpatents

Sweatt, William C.

2004-03-02

A condenser for a photolithography system, in which a mask image from a mask is projected onto a wafer through a camera having an entrance pupil, includes a source of propagating radiation, a first mirror illuminated by the radiation, a mirror array illuminated by the radiation reflected from said first mirror, and a second mirror illuminated by the radiation reflected from the array. The mirror array includes a plurality of micromirrors. Each of the micromirrors is selectively actuatable independently of each other. The first mirror and the second mirror are disposed such that the source is imaged onto a plane of the mask and the mirror array is imaged into the entrance pupil of the camera.

Single neural adaptive controller and neural network identifier based on PSO algorithm for spherical actuators with 3D magnet array

NASA Astrophysics Data System (ADS)

Yan, Liang; Zhang, Lu; Zhu, Bo; Zhang, Jingying; Jiao, Zongxia

2017-10-01

Permanent magnet spherical actuator (PMSA) is a multi-variable featured and inter-axis coupled nonlinear system, which unavoidably compromises its motion control implementation. Uncertainties such as external load and friction torque of ball bearing and manufacturing errors also influence motion performance significantly. Therefore, the objective of this paper is to propose a controller based on a single neural adaptive (SNA) algorithm and a neural network (NN) identifier optimized with a particle swarm optimization (PSO) algorithm to improve the motion stability of PMSA with three-dimensional magnet arrays. The dynamic model and computed torque model are formulated for the spherical actuator, and a dynamic decoupling control algorithm is developed. By utilizing the global-optimization property of the PSO algorithm, the NN identifier is trained to avoid locally optimal solution and achieve high-precision compensations to uncertainties. The employment of the SNA controller helps to reduce the effect of compensation errors and convert the system to a stable one, even if there is difference between the compensations and uncertainties due to external disturbances. A simulation model is established, and experiments are conducted on the research prototype to validate the proposed control algorithm. The amplitude of the parameter perturbation is set to 5%, 10%, and 15%, respectively. The strong robustness of the proposed hybrid algorithm is validated by the abundant simulation data. It shows that the proposed algorithm can effectively compensate the influence of uncertainties and eliminate the effect of inter-axis couplings of the spherical actuator.

Dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by infrared radiation.

PubMed

Kwon, Beomjin; Rosenberger, Matthew; Bhargava, Rohit; Cahill, David G; King, William P

2012-01-01

This paper investigates the dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by an infrared laser operating at a wavelenegth of 10.35 μm. A model relates incident radiation, heat transfer, temperature distribution in the cantilever, and thermal expansion mismatch to find the cantilever displacement. Experiments were conducted on two custom-fabricated bimaterial cantilevers and two commercially available bimaterial microcantilevers. The cantilever response was measured as a function of the modulation frequency of the laser over the range of 0.01-30 kHz. The model and the method of cantilever displacement calibration can be applied for bimaterial cantilever with thick coating layer. The sensitivity and signal-to-noise of bimaterial cantilevers were evaluated in terms of either total incident power or incident flux. The custom-fabricated bimaterial cantilevers showed 9X or 190X sensitivity improvement compared to commercial cantilevers. The detection limit on incident flux is as small as 0.10 pW μm(-2) Hz(-1/2).

Drift study of SU8 cantilevers in liquid and gaseous environments.

PubMed

Tenje, Maria; Keller, Stephan; Dohn, Søren; Davis, Zachary J; Boisen, Anja

2010-05-01

We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum.

Sobol method application in dimensional sensitivity analyses of different AFM cantilevers for biological particles

NASA Astrophysics Data System (ADS)

Korayem, M. H.; Taheri, M.; Ghahnaviyeh, S. D.

2015-08-01

Due to the more delicate nature of biological micro/nanoparticles, it is necessary to compute the critical force of manipulation. The modeling and simulation of reactions and nanomanipulator dynamics in a precise manipulation process require an exact modeling of cantilevers stiffness, especially the stiffness of dagger cantilevers because the previous model is not useful for this investigation. The stiffness values for V-shaped cantilevers can be obtained through several methods. One of them is the PBA method. In another approach, the cantilever is divided into two sections: a triangular head section and two slanted rectangular beams. Then, deformations along different directions are computed and used to obtain the stiffness values in different directions. The stiffness formulations of dagger cantilever are needed for this sensitivity analyses so the formulations have been driven first and then sensitivity analyses has been started. In examining the stiffness of the dagger-shaped cantilever, the micro-beam has been divided into two triangular and rectangular sections and by computing the displacements along different directions and using the existing relations, the stiffness values for dagger cantilever have been obtained. In this paper, after investigating the stiffness of common types of cantilevers, Sobol sensitivity analyses of the effects of various geometric parameters on the stiffness of these types of cantilevers have been carried out. Also, the effects of different cantilevers on the dynamic behavior of nanoparticles have been studied and the dagger-shaped cantilever has been deemed more suitable for the manipulation of biological particles.

Simulation-Based Approach for Site-Specific Optimization of Hydrokinetic Turbine Arrays

NASA Astrophysics Data System (ADS)

Sotiropoulos, F.; Chawdhary, S.; Yang, X.; Khosronejad, A.; Angelidis, D.

2014-12-01

A simulation-based approach has been developed to enable site-specific optimization of tidal and current turbine arrays in real-life waterways. The computational code is based on the St. Anthony Falls Laboratory Virtual StreamLab (VSL3D), which is able to carry out high-fidelity simulations of turbulent flow and sediment transport processes in rivers and streams taking into account the arbitrary geometrical complexity characterizing natural waterways. The computational framework can be used either in turbine-resolving mode, to take into account all geometrical details of the turbine, or with the turbines parameterized as actuator disks or actuator lines. Locally refined grids are employed to dramatically increase the resolution of the simulation and enable efficient simulations of multi-turbine arrays. Turbine/sediment interactions are simulated using the coupled hydro-morphodynamic module of VSL3D. The predictive capabilities of the resulting computational framework will be demonstrated by applying it to simulate turbulent flow past a tri-frame configuration of hydrokinetic turbines in a rigid-bed turbulent open channel flow as well as turbines mounted on mobile bed open channels to investigate turbine/sediment interactions. The utility of the simulation-based approach for guiding the optimal development of turbine arrays in real-life waterways will also be discussed and demonstrated. This work was supported by NSF grant IIP-1318201. Simulations were carried out at the Minnesota Supercomputing Institute.

Note: Improved calibration of atomic force microscope cantilevers using multiple reference cantilevers.

PubMed

Sader, John E; Friend, James R

2015-05-01

Overall precision of the simplified calibration method in J. E. Sader et al., Rev. Sci. Instrum. 83, 103705 (2012), Sec. III D, is dominated by the spring constant of the reference cantilever. The question arises: How does one take measurements from multiple reference cantilevers, and combine these results, to improve uncertainty of the reference cantilever's spring constant and hence the overall precision of the method? This question is addressed in this note. Its answer enables manufacturers to specify of a single set of data for the spring constant, resonant frequency, and quality factor, from measurements on multiple reference cantilevers. With this data set, users can trivially calibrate cantilevers of the same type.

A Low Temperature Scanning Force Microscope with a Vertical Cantilever and Interferometric Detection Scheme

NASA Astrophysics Data System (ADS)

Kim, Jeehoon; Williams, T. L.; Chu, Sang Lin; Korre, Hasan; Chalfin, Max; Hoffman, J. E.

2008-03-01

We have developed a fiber-optic interferometry system with a vertical cantilever for scanning force microscopy. A lens, mounted on a Pan-type walker, was used to collect the interference signal in the cavity between the cantilever and the single mode fiber. This vertical geometry has several advantages: (1) it is directly sensitive to lateral forces; (2) low spring constant vertical cantilevers may allow increased force sensitivity by solving the ``snap-in'' problem that occurs with soft horizontal cantilevers. We have sharpened vertical cantilevers by focused ion beam (FIB), achieving a tip radius of 20 nm. We will show test results of a magnetic force microscope (MFM) with this vertical cantilever system.

Bi-harmonic cantilever design for improved measurement sensitivity in tapping-mode atomic force microscopy.

PubMed

Loganathan, Muthukumaran; Bristow, Douglas A

2014-04-01

This paper presents a method and cantilever design for improving the mechanical measurement sensitivity in the atomic force microscopy (AFM) tapping mode. The method uses two harmonics in the drive signal to generate a bi-harmonic tapping trajectory. Mathematical analysis demonstrates that the wide-valley bi-harmonic tapping trajectory is as much as 70% more sensitive to changes in the sample topography than the standard single-harmonic trajectory typically used. Although standard AFM cantilevers can be driven in the bi-harmonic tapping trajectory, they require large forcing at the second harmonic. A design is presented for a bi-harmonic cantilever that has a second resonant mode at twice its first resonant mode, thereby capable of generating bi-harmonic trajectories with small forcing signals. Bi-harmonic cantilevers are fabricated by milling a small cantilever on the interior of a standard cantilever probe using a focused ion beam. Bi-harmonic drive signals are derived for standard cantilevers and bi-harmonic cantilevers. Experimental results demonstrate better than 30% improvement in measurement sensitivity using the bi-harmonic cantilever. Images obtained through bi-harmonic tapping exhibit improved sharpness and surface tracking, especially at high scan speeds and low force fields.

Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same

NASA Technical Reports Server (NTRS)

Tang, Tony K. (Inventor); Kaiser, William J. (Inventor); Bartman, Randall K. (Inventor); Wilcox, Jaroslava Z. (Inventor); Gutierrez, Roman C. (Inventor); Calvet, Robert J. (Inventor)

1999-01-01

When embodied in a microgyroscope, the invention is comprised of a silicon, four-leaf clover structure with a post attached to the center. The whole structure is suspended by four silicon cantilevers or springs. The device is electrostatically actuated and capacitively detects Coriolis induced motions of the leaves of the leaf clover structure. In the case where the post is not symmetric with the plane of the clover leaves, the device can is usable as an accelerometer. If the post is provided in the shape of a dumb bell or an asymmetric post, the center of gravity is moved out of the plane of clover leaf structure and a hybrid device is provided. When the clover leaf structure is used without a center mass, it performs as a high Q resonator usable as a sensor of any physical phenomena which can be coupled to the resonant performance.

Active vibration control using a modal-domain fiber optic sensor

NASA Technical Reports Server (NTRS)

Cox, David E.

1992-01-01

A closed-loop control experiment is described in which vibrations of a cantilevered beam are suppressed using measurements from a modal-domain fiber optic sensor. Modal-domain sensors are interference between the modes of a few-mode optical waveguide to detect strain. The fiber is bonded along the length of the beam and provides a measurement related to the strain distribution on the surface of the beam. A model for the fiber optic sensor is derived, and this model is integrated with the dynamic model of the beam. A piezoelectric actuator is also bonded to the beam and used to provide control forces. Control forces are obtained through dynamic compensation of the signal from the fiber optic sensor. The compensator is implemented with a real-time digital controller. Analytical models are verified by comparing simulations to experimental results for both open-loop and closed-loop configurations.

Wafer-scale growth of highly textured piezoelectric thin films by pulsed laser deposition for micro-scale sensors and actuators

NASA Astrophysics Data System (ADS)

Nguyen, M. D.; Tiggelaar, R.; Aukes, T.; Rijnders, G.; Roelof, G.

2017-11-01

Piezoelectric lead-zirconate-titanate (PZT) thin films were deposited on 4-inch (111)Pt/Ti/SiO2/Si(001) wafers using large-area pulsed laser deposition (PLD). This study was focused on the homogeneity in film thickness, microstructure, ferroelectric and piezoelectric properties of PZT thin films. The results indicated that the highly textured (001)-oriented PZT thin films with wafer-scale thickness homogeneity (990 nm ± 0.8%) were obtained. The films were fabricated into piezoelectric cantilevers through a MEMS microfabrication process. The measured longitudinal piezoelectric coefficient (d 33f = 210 pm/V ± 1.6%) and piezoelectric transverse coefficient (e 31f = -18.8 C/m2 ± 2.8%) were high and homogeneity across wafers. The high piezoelectric properties on Si wafers will extend industrial application of PZT thin films and further development of piezoMEMS.

High-speed wavefront control using MEMS micromirrors

NASA Astrophysics Data System (ADS)

Bifano, T. G.; Stewart, J. B.

2005-08-01

Over the past decade, a number of electrostatically-actuated MEMS deformable mirror devices have been used for adaptive control in beam-forming and imaging applications. One architecture that has been widely used is the silicon device developed by Boston University, consisting of a continuous or segmented mirror supported by post attachments to an array of parallel plate electrostatic actuators. MEMS deformable mirrors and segmented mirrors with up to 1024 of these actuators have been used in open loop and closed loop control systems to control wavefront errors. Frame rates as high as 11kHz have been demonstrated. Mechanically, the actuators used in this device exhibit a first-mode resonant frequency that is in the range of many tens of kilohertz up to a few hundred kilohertz. Viscous air damping has been found to limit operation at such high frequencies in air at standard pressure. Some applications in high-speed tracking and beam-forming could benefit from increased speed. In this paper, several approaches to achieving critically-damped performance with such MEMS DMs are detailed, and theoretical and experimental results are presented. One approach is to seal the MEMS DM in a full or partial vacuum environment, thereby affecting air damping. After vacuum sealing the device's predicted resonant behavior at tens of kilohertz was observed. In vacuum, the actuator's intrinsic material damping is quite small, resulting in considerable oscillation in step response. To alleviate this problem, a two-step actuation algorithm was employed. Precise control of a single actuator frequencies up to 100kHz without overshoot was demonstrated using this approach. Another approach to increasing actuation speed was to design actuators that reduce air damping effects. This is also demonstrated in the paper.

Accuracy of the actuator disc-RANS approach for predicting the performance and wake of tidal turbines.

PubMed

Batten, W M J; Harrison, M E; Bahaj, A S

2013-02-28

The actuator disc-RANS model has widely been used in wind and tidal energy to predict the wake of a horizontal axis turbine. The model is appropriate where large-scale effects of the turbine on a flow are of interest, for example, when considering environmental impacts, or arrays of devices. The accuracy of the model for modelling the wake of tidal stream turbines has not been demonstrated, and flow predictions presented in the literature for similar modelled scenarios vary significantly. This paper compares the results of the actuator disc-RANS model, where the turbine forces have been derived using a blade-element approach, to experimental data measured in the wake of a scaled turbine. It also compares the results with those of a simpler uniform actuator disc model. The comparisons show that the model is accurate and can predict up to 94 per cent of the variation in the experimental velocity data measured on the centreline of the wake, therefore demonstrating that the actuator disc-RANS model is an accurate approach for modelling a turbine wake, and a conservative approach to predict performance and loads. It can therefore be applied to similar scenarios with confidence.

Fluid flow sensing with ionic polymer-metal composites

NASA Astrophysics Data System (ADS)

Stalbaum, Tyler; Trabia, Sarah; Shen, Qi; Kim, Kwang J.

2016-04-01

Ionic polymer-metal composite (IPMC) actuators and sensors have been developed and modeled over the last two decades for use as soft-robotic deformable actuators and sensors. IPMC devices have been suggested for application as underwater actuators, energy harvesting devices, and medical devices such as in guided catheter insertion. Another interesting application of IPMCs in flow sensing is presented in this study. IPMC interaction with fluid flow is of interest to investigate the use of IPMC actuators as flow control devices and IPMC sensors as flow sensing devices. An organized array of IPMCs acting as interchanging sensors and actuators could potentially be designed for both flow measurement and control, providing an unparalleled tool in maritime operations. The underlying physics for this system include the IPMC ion transport and charge fundamental framework along with fluid dynamics to describe the flow around IPMCs. An experimental setup for an individual rectangular IPMC sensor with an externally controlled fluid flow has been developed to investigate this phenomenon and provide further insight into the design and application of this type of device. The results from this portion of the study include recommendations for IPMC device designs in flow control.

Separation Control in a Centrifugal Bend Using Plasma Actuators

NASA Astrophysics Data System (ADS)

Arthur, Michael; Corke, Thomas

2011-11-01

An experiment and CFD simulation are presented to examine the use of plasma actuators to control flow separation in a 2-D channel with a 135° inside-bend that is intended to represent a centrifugal bend in a gas turbine engine. The design inlet conditions are P = 330 psia., T =1100° F, and M = 0 . 24 . For these conditions, the flow separates on the inside radius of the bend. A CFD simulation was used to determine the location of the flow separation, and the conditions (location and voltage) of a plasma actuator that was needed to keep the flow attached. The plasma actuator body force model used in the simulation was updated to include the effect of high-pressure operation. An experiment was used to validate the simulation and to further investigate the effect of inlet pressure and Mach number on the flow separation control. This involved a transient high-pressure blow-down facility. The flow field is documented using an array of static pressure taps in the channel outside-radius side wall, and a rake of total pressure probes at the exit of the bend. The results as well as the pressure effect on the plasma actuators are presented.

The actuation of microflaps inspired by shark scales deeply embedded in a boundary layer

NASA Astrophysics Data System (ADS)

Morris, Jackson; Lang, Amy; Hubner, Paul

2016-11-01

Thanks to millions of years of natural selection, sharks have evolved to become quick apex predators. Shark skin is made up of microscopic scales on the order of 0.2 mm in size. This array of scales is hypothesized to be a flow control mechanism where individual scales are capable of being passively actuated by reversed flow in water due to their preferential orientation to attached flow. Previous research has proven shark skin to reduce flow separation in water, which would result in lower pressure drag. We believe shark scales are strategically sized to interact with the lower 5 percent of the boundary layer, where reversed flow occurs close to the wall. To test the capability of micro-flaps to be actuated in air various sets of flaps, inspired by shark scale geometry, were rapidly prototyped. These microflaps were tested in a low-speed wind tunnel at various flow speeds and boundary layer thicknesses. Boundary layer flow conditions were measured using a hot-wire probe and microflap actuation was observed. Microflap actuation in airflow would mean that this bio-inspired separation control mechanism found on shark skin has potential application for aircraft. Boeing.

Ultrasonic resonant piezoelectric actuator with intrinsic torque measurement.

PubMed

Pott, Peter P; Matich, Sebastian; Schlaak, Helmut F

2012-11-01

Piezoelectric ultrasonic actuators are widely used in small-scale actuation systems, in which a closed-loop position control is usually utilized. To save an additional torque sensor, the intrinsic measurement capabilities of the piezoelectric material can be employed. To prove feasibility, a motor setup with clearly separated actuation for the friction and driving forces is chosen. The motor concept is based on resonant ultrasonic vibrations. To assess the effects of the direct piezoelectric effect, a capacitance bridge-type circuit has been selected. Signal processing is done by a measurement card with an integrated field-programmable gate array. The motor is used to drive a winch, and different torques are applied by means of weights to be lifted. Assessing the bridge voltage, a good proportionality to the applied torque of 1.47 mV/mN·m is shown. A hysteresis of 1% has been determined. The chosen motor concept is useful for intrinsic torque measurement. However, it provides drawbacks in terms of limited mechanical performance, wear, and thermal losses because of the soft piezoelectric material. Future work will comprise the application of the method to commercially available piezoelectric actuators as well as the implementation of the measurement circuit in an embedded system.

A versatile LabVIEW and field-programmable gate array-based scanning probe microscope for in operando electronic device characterization.

PubMed

Berger, Andrew J; Page, Michael R; Jacob, Jan; Young, Justin R; Lewis, Jim; Wenzel, Lothar; Bhallamudi, Vidya P; Johnston-Halperin, Ezekiel; Pelekhov, Denis V; Hammel, P Chris

2014-12-01

Understanding the complex properties of electronic and spintronic devices at the micro- and nano-scale is a topic of intense current interest as it becomes increasingly important for scientific progress and technological applications. In operando characterization of such devices by scanning probe techniques is particularly well-suited for the microscopic study of these properties. We have developed a scanning probe microscope (SPM) which is capable of both standard force imaging (atomic, magnetic, electrostatic) and simultaneous electrical transport measurements. We utilize flexible and inexpensive FPGA (field-programmable gate array) hardware and a custom software framework developed in National Instrument's LabVIEW environment to perform the various aspects of microscope operation and device measurement. The FPGA-based approach enables sensitive, real-time cantilever frequency-shift detection. Using this system, we demonstrate electrostatic force microscopy of an electrically biased graphene field-effect transistor device. The combination of SPM and electrical transport also enables imaging of the transport response to a localized perturbation provided by the scanned cantilever tip. Facilitated by the broad presence of LabVIEW in the experimental sciences and the openness of our software solution, our system permits a wide variety of combined scanning and transport measurements by providing standardized interfaces and flexible access to all aspects of a measurement (input and output signals, and processed data). Our system also enables precise control of timing (synchronization of scanning and transport operations) and implementation of sophisticated feedback protocols, and thus should be broadly interesting and useful to practitioners in the field.

A versatile LabVIEW and field-programmable gate array-based scanning probe microscope for in operando electronic device characterization

DOE Office of Scientific and Technical Information (OSTI.GOV)

Berger, Andrew J., E-mail: berger.156@osu.edu; Page, Michael R.; Young, Justin R.

Understanding the complex properties of electronic and spintronic devices at the micro- and nano-scale is a topic of intense current interest as it becomes increasingly important for scientific progress and technological applications. In operando characterization of such devices by scanning probe techniques is particularly well-suited for the microscopic study of these properties. We have developed a scanning probe microscope (SPM) which is capable of both standard force imaging (atomic, magnetic, electrostatic) and simultaneous electrical transport measurements. We utilize flexible and inexpensive FPGA (field-programmable gate array) hardware and a custom software framework developed in National Instrument's LabVIEW environment to perform themore » various aspects of microscope operation and device measurement. The FPGA-based approach enables sensitive, real-time cantilever frequency-shift detection. Using this system, we demonstrate electrostatic force microscopy of an electrically biased graphene field-effect transistor device. The combination of SPM and electrical transport also enables imaging of the transport response to a localized perturbation provided by the scanned cantilever tip. Facilitated by the broad presence of LabVIEW in the experimental sciences and the openness of our software solution, our system permits a wide variety of combined scanning and transport measurements by providing standardized interfaces and flexible access to all aspects of a measurement (input and output signals, and processed data). Our system also enables precise control of timing (synchronization of scanning and transport operations) and implementation of sophisticated feedback protocols, and thus should be broadly interesting and useful to practitioners in the field.« less

A Vibration-Based MEMS Piezoelectric Energy Harvester and Power Conditioning Circuit

PubMed Central

Yu, Hua; Zhou, Jielin; Deng, Licheng; Wen, Zhiyu

2014-01-01

This paper presents a micro-electro-mechanical system (MEMS) piezoelectric power generator array for vibration energy harvesting. A complete design flow of the vibration-based energy harvester using the finite element method (FEM) is proposed. The modal analysis is selected to calculate the resonant frequency of the harvester, and harmonic analysis is performed to investigate the influence of the geometric parameters on the output voltage. Based on simulation results, a MEMS Pb(Zr,Ti)O3 (PZT) cantilever array with an integrated large Si proof mass is designed and fabricated to improve output voltage and power. Test results show that the fabricated generator, with five cantilever beams (with unit dimensions of about 3 × 2.4 × 0.05 mm3) and an individual integrated Si mass dimension of about 8 × 12.4 × 0.5 mm3, produces a output power of 66.75 μW, or a power density of 5.19 μW·mm−3·g−2 with an optimal resistive load of 220 kΩ from 5 m/s2 vibration acceleration at its resonant frequency of 234.5 Hz. In view of high internal impedance characteristic of the PZT generator, an efficient autonomous power conditioning circuit, with the function of impedance matching, energy storage and voltage regulation, is then presented, finding that the efficiency of the energy storage is greatly improved and up to 64.95%. The proposed self-supplied energy generator with power conditioning circuit could provide a very promising complete power supply solution for wireless sensor node loads. PMID:24556670

A vibration-based MEMS piezoelectric energy harvester and power conditioning circuit.

PubMed

Yu, Hua; Zhou, Jielin; Deng, Licheng; Wen, Zhiyu

2014-02-19

This paper presents a micro-electro-mechanical system (MEMS) piezoelectric power generator array for vibration energy harvesting. A complete design flow of the vibration-based energy harvester using the finite element method (FEM) is proposed. The modal analysis is selected to calculate the resonant frequency of the harvester, and harmonic analysis is performed to investigate the influence of the geometric parameters on the output voltage. Based on simulation results, a MEMS Pb(Zr,Ti)O3 (PZT) cantilever array with an integrated large Si proof mass is designed and fabricated to improve output voltage and power. Test results show that the fabricated generator, with five cantilever beams (with unit dimensions of about 3 × 2.4 × 0.05 mm3) and an individual integrated Si mass dimension of about 8 × 12.4 × 0.5 mm3, produces a output power of 66.75 μW, or a power density of 5.19 μW∙mm-3∙g-2 with an optimal resistive load of 220 kΩ from 5 m/s2 vibration acceleration at its resonant frequency of 234.5 Hz. In view of high internal impedance characteristic of the PZT generator, an efficient autonomous power conditioning circuit, with the function of impedance matching, energy storage and voltage regulation, is then presented, finding that the efficiency of the energy storage is greatly improved and up to 64.95%. The proposed self-supplied energy generator with power conditioning circuit could provide a very promising complete power supply solution for wireless sensor node loads.

Modal control of a plate using a fuzzy logic controller

NASA Astrophysics Data System (ADS)

Sharma, Manu; Singh, S. P.; Sachdeva, B. L.

2007-08-01

This paper presents fuzzy logic based independent modal space control (IMSC) and fuzzy logic based modified independent modal space control (MIMSC) of vibration. The rule base of the controller consists of nine rules, which have been derived based upon simple human reasoning. Input to the controller consists of the first two modal displacements and velocities of the structure and the output of the controller is the modal force to be applied by the actuator. Fuzzy logic is used in such a way that the actuator is never called to apply effort which is beyond safe limits and also the operator is saved from calculating control gains. The proposed fuzzy controller is experimentally tested for active vibration control of a cantilevered plate. A piezoelectric patch is used as a sensor to sense vibrations of the plate and another piezoelectric patch is used as an actuator to control vibrations of the plate. For analytical formulation, a finite element method based upon Hamilton's principle is used to model the plate. For experimentation, the first two modes of the plate are observed using a Kalman observer. Real-time experiments are performed to control the first mode, the second mode and both modes simultaneously. Experiments are also performed to control the first mode by IMSC, the second mode by IMSC and both modes simultaneously by MIMSC. It is found that for the same decibel reduction in the first mode, the voltage applied by the fuzzy logic based controller is less than that applied by IMSC. While controlling the second mode by IMSC, a considerable amount of spillover is observed in the first mode and region just after the second mode, whereas while controlling the second mode by fuzzy logic, spillover effects are much smaller. While controlling two modes simultaneously, with a single sensor/actuator pair, appreciable resonance control is observed both with fuzzy logic based MIMSC as well as with direct MIMSC, but there is a considerable amount of spillover in the off-resonance region. This may be due to the sub-optimal location and/or an insufficient number of actuators. So, another smart plate with two piezoelectric actuators and one piezoelectric sensor is considered. Piezoelectric patches are fixed in an area where modal strains are high. With this configuration of the smart plate, experiments are conducted to control the first three modes of the plate and it is found that spillover effects are greatly reduced.

Piezocomposite Actuator Arrays for Correcting and Controlling Wavefront Error in Reflectors

NASA Technical Reports Server (NTRS)

Bradford, Samuel Case; Peterson, Lee D.; Ohara, Catherine M.; Shi, Fang; Agnes, Greg S.; Hoffman, Samuel M.; Wilkie, William Keats

2012-01-01

Three reflectors have been developed and tested to assess the performance of a distributed network of piezocomposite actuators for correcting thermal deformations and total wave-front error. The primary testbed article is an active composite reflector, composed of a spherically curved panel with a graphite face sheet and aluminum honeycomb core composite, and then augmented with a network of 90 distributed piezoelectric composite actuators. The piezoelectric actuator system may be used for correcting as-built residual shape errors, and for controlling low-order, thermally-induced quasi-static distortions of the panel. In this study, thermally-induced surface deformations of 1 to 5 microns were deliberately introduced onto the reflector, then measured using a speckle holography interferometer system. The reflector surface figure was subsequently corrected to a tolerance of 50 nm using the actuators embedded in the reflector's back face sheet. Two additional test articles were constructed: a borosilicate at window at 150 mm diameter with 18 actuators bonded to the back surface; and a direct metal laser sintered reflector with spherical curvature, 230 mm diameter, and 12 actuators bonded to the back surface. In the case of the glass reflector, absolute measurements were performed with an interferometer and the absolute surface was corrected. These test articles were evaluated to determine their absolute surface control capabilities, as well as to assess a multiphysics modeling effort developed under this program for the prediction of active reflector response. This paper will describe the design, construction, and testing of active reflector systems under thermal loads, and subsequent correction of surface shape via distributed peizeoelctric actuation.

MEMS Cantilever Sensor for THz Photoacoustic Chemical Sensing and Spectroscopy

DTIC Science & Technology

2013-12-26

meaning the detector didn’t have to be cryogenically cooled. Piezoresistive cantilever style sensor designs have been fabricated for wind and...made a two cantilever pizeoresistive wind speed sensor that utilized a Wheatstone bridge configuration. The designed cantilevers, etched out of...Murakami et al. in Japan fabricated diaphragm and cantilever PZT microphone sensors for anomaly detection in machines such as turbines or engines

Micro-elastometry on whole blood clots using actuated surface-attached posts (ASAPs).

PubMed

Judith, Robert M; Fisher, Jay K; Spero, Richard Chasen; Fiser, Briana L; Turner, Adam; Oberhardt, Bruce; Taylor, R M; Falvo, Michael R; Superfine, Richard

2015-03-07

We present a novel technology for microfluidic elastometry and demonstrate its ability to measure stiffness of blood clots as they form. A disposable micro-capillary strip draws small volumes (20 μL) of whole blood into a chamber containing a surface-mounted micropost array. The posts are magnetically actuated, thereby applying a shear stress to the blood clot. The posts' response to magnetic field changes as the blood clot forms; this response is measured by optical transmission. We show that a quasi-static model correctly predicts the torque applied to the microposts. We experimentally validate the ability of the system to measure clot stiffness by correlating our system with a commercial thromboelastograph. We conclude that actuated surface-attached post (ASAP) technology addresses a clinical need for point-of-care and small-volume elastic haemostatic assays.

Characterization of steady streaming for a particle manipulation system.

PubMed

Amit, Roni; Abadi, Avi; Kosa, Gabor

2016-04-01

Accurate positioning of biological cells or microscopic particle without directly contacting them is a challenging task in biomedical engineering. Various trapping methods for controlling the position of a particle have been suggested. The common driving methods are based on laser and ultrasonic actuation principles. In this work we suggest a design for a hydrodynamic particle manoeuvring system. The system operates using steady streaming in a viscous fluid media induced by high frequency vibration of piezoelectric cantilevers. A particle within the workspace of the system can be trapped and manipulated to a desired position by the fairly unidirectional flow field created by the beams. In this paper, the flow field in the particle manipulation system is characterized numerically and experimentally. We find that the flow field resembles the analytical solutions of a flow field created by an oscillating sphere. Furthermore, we validate numerically the quadratic relation between the steady streaming velocity and the vibration amplitude of the beam. The calibration of the piezoelectric actuator's oscillation amplitudes enables effective positioning of particles with a diameter of 20 um to 1 mm. We find that a 30X0.8X2 mm(3) piezoelectric beam vibrating at its first resonance frequency, 200 Hz, is able to move a particle at a typical flow velocity ranging between 0.05 mm/sec and 0.13 mm/s in 430 cSt Si oil (Re=0.2).

Dynamic response of a cracked atomic force microscope cantilever used for nanomachining

PubMed Central

2012-01-01

The vibration behavior of an atomic force microscope [AFM] cantilever with a crack during the nanomachining process is studied. The cantilever is divided into two segments by the crack, and a rotational spring is used to simulate the crack. The two individual governing equations of transverse vibration for the cracked cantilever can be expressed. However, the corresponding boundary conditions are coupled because of the crack interaction. Analytical expressions for the vibration displacement and natural frequency of the cracked cantilever are obtained. In addition, the effects of crack flexibility, crack location, and tip length on the vibration displacement of the cantilever are analyzed. Results show that the crack occurs in the AFM cantilever that can significantly affect its vibration response. PACS: 07.79.Lh; 62.20.mt; 62.25.Jk PMID:22335820