Lateral displacement and rotational displacement sensor
Duden, Thomas
2014-04-22
A position measuring sensor formed from opposing sets of capacitor plates measures both rotational displacement and lateral displacement from the changes in capacitances as overlapping areas of capacitors change. Capacitances are measured by a measuring circuit. The measured capacitances are provided to a calculating circuit that performs calculations to obtain angular and lateral displacement from the capacitances measured by the measuring circuit.
NASA Technical Reports Server (NTRS)
Collamore, Frank N.
1989-01-01
The development of a miniature multifunction turbomachinery shaft displacement sensor using state-of-the-art non-contract capacitive sensing technology is described. Axial displacement, radial displacement, and speed are sensed using a single probe within the envelope normally required for a single function. A survey of displacement sensing technology is summarized including inductive, capacitive, optical and ultrasonic techniques. The design and operation of an experimental triple function sensor is described. Test results are included showing calibration tests and simultaneous dynamic testing of multiple functions. Recommendations for design changes are made to improve low temperature performance, reliability, and for design of a flight type signal conditioning unit.
Warren, Oden L.; Asif, S. A. Syed; Cyrankowski, Edward; Kounev, Kalin
2010-09-21
An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.-
Warren, Oden L; Asif, Syed Amanula Syed; Cyrankowski, Edward; Kounev, Kalin
2013-06-04
An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.
Wirelessly Interrogated Position or Displacement Sensors
NASA Technical Reports Server (NTRS)
Woodard, Stanley E.; Taylor, Bryant D.
2007-01-01
Two simple position or displacement sensors based on inductance-capacitance resonant circuits have been conceived. These sensors are both powered and interrogated without use of wires and without making contact with other objects. Instead, excitation and interrogation are accomplished by means of a magnetic-field-response recorder. Both of the present position or displacement sensors consist essentially of variable rectangular parallel-plate capacitors electrically connected in series with fixed inductors. Simple inductance-capacitance circuits of the type used in these sensors are inherently robust; their basic mode of operation does not depend on maintenance of specific environmental conditions. Hence, these sensors can be used under such harsh conditions as cryogenic temperatures, high pressures, and radioactivity.
A novel capacitive absolute positioning sensor based on time grating with nanometer resolution
NASA Astrophysics Data System (ADS)
Pu, Hongji; Liu, Hongzhong; Liu, Xiaokang; Peng, Kai; Yu, Zhicheng
2018-05-01
The present work proposes a novel capacitive absolute positioning sensor based on time grating. The sensor includes a fine incremental-displacement measurement component combined with a coarse absolute-position measurement component to obtain high-resolution absolute positioning measurements. A single row type sensor was proposed to achieve fine displacement measurement, which combines the two electrode rows of a previously proposed double-row type capacitive displacement sensor based on time grating into a single row. To achieve absolute positioning measurement, the coarse measurement component is designed as a single-row type displacement sensor employing a single spatial period over the entire measurement range. In addition, this component employs a rectangular induction electrode and four groups of orthogonal discrete excitation electrodes with half-sinusoidal envelope shapes, which were formed by alternately extending the rectangular electrodes of the fine measurement component. The fine and coarse measurement components are tightly integrated to form a compact absolute positioning sensor. A prototype sensor was manufactured using printed circuit board technology for testing and optimization of the design in conjunction with simulations. Experimental results show that the prototype sensor achieves a ±300 nm measurement accuracy with a 1 nm resolution over a displacement range of 200 mm when employing error compensation. The proposed sensor is an excellent alternative to presently available long-range absolute nanometrology sensors owing to its low cost, simple structure, and ease of manufacturing.
NASA Astrophysics Data System (ADS)
Yu, Zhicheng; Peng, Kai; Liu, Xiaokang; Pu, Hongji; Chen, Ziran
2018-05-01
High-precision displacement sensors, which can measure large displacements with nanometer resolution, are key components in many ultra-precision fabrication machines. In this paper, a new capacitive nanometer displacement sensor with differential sensing structure is proposed for long-range linear displacement measurements based on an approach denoted time grating. Analytical models established using electric field coupling theory and an area integral method indicate that common-mode interference will result in a first-harmonic error in the measurement results. To reduce the common-mode interference, the proposed sensor design employs a differential sensing structure, which adopts a second group of induction electrodes spatially separated from the first group of induction electrodes by a half-pitch length. Experimental results based on a prototype sensor demonstrate that the measurement accuracy and the stability of the sensor are substantially improved after adopting the differential sensing structure. Finally, a prototype sensor achieves a measurement accuracy of ±200 nm over the full 200 mm measurement range of the sensor.
Research and development of novel wireless digital capacitive displacement sensor
NASA Astrophysics Data System (ADS)
Cui, Junning; He, Zhangqiang; Sun, Tao; Bian, Xingyuan; Han, Lu
2015-02-01
In order to solve the problem of noncontact, wireless and nonmagnetic displacement sensing with nanometer resolution within critical limited space for ultraprecision displacement monitoring in the Joule balance device, a novel wireless digital capacitive displacement sensor (WDCDS) is proposed. The WDCDS is fabricated with brass and other nonmagnetic material and powered with a small battery inside, a small integrated circuit is assembled inside for converting and processing of capacitive signal, and low power Bluetooth is used for wireless signal transmission and communication. Experimental results show that the WDCDS proposed has a resolution of better than 1nm and a nonlinearity of 0.077%, therefore it is a delicate design for ultraprecision noncontact displacement monitoring in the Joule balance device, meeting the demand for properties of wireless, nonmagnetic and miniaturized size.
Archimedean Spiral Pairs with no Electrical Connections as a Passive Wireless Implantable Sensor
Drazan, John F; Gunko, Aleksandra; Dion, Matthew; Abdoun, Omar; Cady, Nathaniel C; Connor, Kenneth A; Ledet, Eric H
2015-01-01
We have developed, modeled, fabricated, and tested a passive wireless sensor system that exhibits a linear frequency-displacement relationship. The displacement sensor is comprised of two anti-aligned Archimedean coils separated by an insulating dielectric layer. There are no electrical connections between the two coils and there are no onboard electronics. The two coils are inductively and capacitively coupled due to their close proximity. The sensor system is interrogated wirelessly by monitoring the return loss parameter from a vector network analyzer. The resonant frequency of the sensor is dependent on the displacement between the two coils. Due to changes in the inductive and capacitive coupling between the coils at different distances, the resonant frequency is modulated by coil separation. In a specified range, the frequency shift can be linearized with respect to coil separation. Batch fabrication techniques were used to fabricate copper coils for experimental testing with air as the dielectric. Through testing, we validated the performance of sensors as predicted within acceptable errors. Because of its simplicity, this displacement sensor has potential applications for in vivo sensing. PMID:27430033
A Simple Sensor Model for THUNDER Actuators
NASA Technical Reports Server (NTRS)
Campbell, Joel F.; Bryant, Robert G.
2009-01-01
A quasi-static (low frequency) model is developed for THUNDER actuators configured as displacement sensors based on a simple Raleigh-Ritz technique. This model is used to calculate charge as a function of displacement. Using this and the calculated capacitance, voltage vs. displacement and voltage vs. electrical load curves are generated and compared with measurements. It is shown this model gives acceptable results and is useful for determining rough estimates of sensor output for various loads, laminate configurations and thicknesses.
NASA Astrophysics Data System (ADS)
Zhang, Min; Wang, Wen; Xiang, Kui; Lu, Keqing; Fan, Zongwei
2015-02-01
This paper describes a novel cylindrical capacitive sensor (CCS) to measure the spindle five degree-of-freedom (DOF) motion errors. The operating principle and mathematical models of the CCS are presented. Using Ansoft Maxwell software to calculate the different capacitances in different configurations, structural parameters of end face electrode are then investigated. Radial, axial and tilt motions are also simulated by making comparisons with the given displacements and the simulation values respectively. It could be found that the proposed CCS has a high accuracy for measuring radial motion error when the average eccentricity is about 15 μm. Besides, the maximum relative error of axial displacement is 1.3% when the axial motion is within [0.7, 1.3] mm, and the maximum relative error of the tilt displacement is 1.6% as rotor tilts around a single axis within [-0.6, 0.6]°. Finally, the feasibility of the CCS for measuring five DOF motion errors is verified through simulation and analysis.
Radial displacement sensor for non-contact bearings
NASA Technical Reports Server (NTRS)
McCormick, John A. (Inventor); Sixsmith, Herbert (Inventor)
1998-01-01
A radial position sensor includes four capacitive electrodes oriented about a shaft, arranged in two diametrically opposite pairs. Sensor circuitry generates an output signal in proportion to the capacitance between the electrodes and the shaft; the capacitance between an electrode and the shaft increases as the shaft approaches the electrode and decreases as the shaft recedes from the electrode. The sensor circuitry applies an alternating voltage to one electrode of a pair and a 180 degree out of phase alternating voltage to the other electrode of the pair. The electrical responses of the two electrodes to their respective input signals are summed to form a radial deviation signal which is relatively free from the alternating voltage and accurately represents the position of the shaft relative to the electrodes of the pair.
Feasibility of novel four degrees of freedom capacitive force sensor for skin interface force
2012-01-01
Background The objective of our study was to develop a novel capacitive force sensor that enables simultaneous measurements of yaw torque around the pressure axis and normal force and shear forces at a single point for the purpose of elucidating pressure ulcer pathogenesis and establishing criteria for selection of cushions and mattresses. Methods Two newly developed sensors (approximately 10 mm×10 mm×5 mm (10) and 20 mm×20 mm×5 mm (20)) were constructed from silicone gel and four upper and lower electrodes. The upper and lower electrodes had sixteen combinations that had the function as capacitors of parallel plate type. The full scale (FS) ranges of force/torque were defined as 0–1.5 N, –0.5-0.5 N and −1.5-1.5 N mm (10) and 0–8.7 N, –2.9-2.9 N and −16.8-16.8 N mm (20) in normal force, shear forces and yaw torque, respectively. The capacitances of sixteen capacitors were measured by an LCR meter (AC1V, 100 kHz) when displacements corresponding to four degrees of freedom (DOF) forces within FS ranges were applied to the sensor. The measurement was repeated three times in each displacement condition (10 only). Force/torque were calculated by corrected capacitance and were evaluated by comparison to theoretical values and standard normal force measured by an universal tester. Results In measurements of capacitance, the coefficient of variation was 3.23% (10). The Maximum FS errors of estimated force/torque were less than or equal to 10.1 (10) and 16.4% (20), respectively. The standard normal forces were approximately 1.5 (10) and 9.4 N (20) when pressure displacements were 3 (10) and 2 mm (20), respectively. The estimated normal forces were approximately 1.5 (10) and 8.6 N (10) in the same condition. Conclusions In this study, we developed a new four DOF force sensor for measurement of force/torque that occur between the skin and a mattress. In measurement of capacitance, the repeatability was good and it was confirmed that the sensor had characteristics that enabled the correction by linear approximation for adjustment of gain and offset. In estimation of forces/torque, we considered accuracy to be within an acceptable range. PMID:23186069
Development of a slip sensor using separable bilayer with Ecoflex-NBR film
NASA Astrophysics Data System (ADS)
Kim, Sung Joon; Moon, Hyungpil; Choi, Hyouk Ryeol; Koo, Ja Choon
2017-04-01
Polymer film-type slip sensor is presented by using novel working principle rather than measuring micro-vibration. The sensor is comprised of bilayer with Ecoflex and NBR(acrylonitrile butadiene rubber) films divided by di-electric. When slip occur on surface, bilayer have relative displacement from each other because friction-induced vibration make a clearance between two layers. This displacement can be obtained by capacitance difference. CNT(carbon nanotube) was employed for electrode because of flexible and stretchable characteristics. Also normal and shear force can be decoupled by the working principle. To verify developed sensor, slip test apparatus was designed and experiments were conducted.
Tan, Xinran; Zhu, Fan; Wang, Chao; Yu, Yang; Shi, Jian; Qi, Xue; Yuan, Feng; Tan, Jiubin
2017-11-19
This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG) that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The principal error of the capacitive sensor for precision microangle measurement is analyzed and compensated for; so as to achieve a high angle output resolution of 10 nrad (0.002 arcsec) and positioning repeatability of 120 nrad (0.024 arcsec) over a large angular range of ±4363 μrad (±900 arcsec) for the 2D-MNAG. The impact of each error component, together with the synthetic error of the 2D-MNAG after principal error compensation are determined using Monte Carlo simulation for further improvement of the 2D-MNAG.
Tan, Xinran; Zhu, Fan; Wang, Chao; Yu, Yang; Shi, Jian; Qi, Xue; Yuan, Feng; Tan, Jiubin
2017-01-01
This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG) that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The principal error of the capacitive sensor for precision microangle measurement is analyzed and compensated for; so as to achieve a high angle output resolution of 10 nrad (0.002 arcsec) and positioning repeatability of 120 nrad (0.024 arcsec) over a large angular range of ±4363 μrad (±900 arcsec) for the 2D-MNAG. The impact of each error component, together with the synthetic error of the 2D-MNAG after principal error compensation are determined using Monte Carlo simulation for further improvement of the 2D-MNAG. PMID:29156595
Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors
Hsieh, Chen-Hsuan; Dai, Ching-Liang; Yang, Ming-Zhi
2013-01-01
This study investigates the design and fabrication of magnetic microsensors using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The magnetic sensor is composed of springs and interdigitated electrodes, and it is actuated by the Lorentz force. The finite element method (FEM) software CoventorWare is adopted to simulate the displacement and capacitance of the magnetic sensor. A post-CMOS process is utilized to release the suspended structure. The post-process uses an anisotropic dry etching to etch the silicon dioxide layer and an isotropic dry etching to remove the silicon substrate. When a magnetic field is applied to the magnetic sensor, it generates a change in capacitance. A sensing circuit is employed to convert the capacitance variation of the sensor into the output voltage. The experimental results show that the output voltage of the magnetic microsensor varies from 0.05 to 1.94 V in the magnetic field range of 5–200 mT. PMID:24172287
NASA Technical Reports Server (NTRS)
Golbabaei-Asl, Mona; Knight, Doyle; Anderson, Kellie; Wilkinson, Stephen
2013-01-01
A novel method for determining the thermal efficiency of the SparkJet is proposed. A SparkJet is attached to the end of a pendulum. The motion of the pendulum subsequent to a single spark discharge is measured using a laser displacement sensor. The measured displacement vs time is compared with the predictions of a theoretical perfect gas model to estimate the fraction of the spark discharge energy which results in heating the gas (i.e., increasing the translational-rotational temperature). The results from multiple runs for different capacitances of c = 3, 5, 10, 20, and 40 micro-F show that the thermal efficiency decreases with higher capacitive discharges.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Gallegos, Jonathan Michael
Balance Probe Monitors were designed, fabricated, installed, and evaluated at Sandia National Laboratories (SNL) for the 22,600 g kg (50,000 g lb) direct drive electromotor driven large centrifuges. These centrifuges provide a high onset/decay rate g environment. The Balance Probe Monitor is physically located near a centrifuge’s Capacitance Probe, a crucial sensor for the centrifuge’s sustainability. The Balance Probe Monitor will validate operability of the centrifuge. Most importantly, it is used for triggering a kill switch under the condition that the centrifuge displacement value exceeds allowed tolerances. During operational conditions, the Capacitance Probe continuously detects the structural displacement of themore » centrifuge and an adjoining AccuMeasure 9000 translates this displacement into an output voltage.« less
A T-Type Capacitive Sensor Capable of Measuring 5-DOF Error Motions of Precision Spindles
Xiang, Kui; Qiu, Rongbo; Mei, Deqing; Chen, Zichen
2017-01-01
The precision spindle is a core component of high-precision machine tools, and the accurate measurement of its error motions is important for improving its rotation accuracy as well as the work performance of the machine. This paper presents a T-type capacitive sensor (T-type CS) with an integrated structure. The proposed sensor can measure the 5-degree-of-freedom (5-DOF) error motions of a spindle in-situ and simultaneously by integrating electrode groups in the cylindrical bore of the stator and the outer end face of its flange, respectively. Simulation analysis and experimental results show that the sensing electrode groups with differential measurement configuration have near-linear output for the different types of rotor displacements. What’s more, the additional capacitance generated by fringe effects has been reduced about 90% with the sensing electrode groups fabricated based on flexible printed circuit board (FPCB) and related processing technologies. The improved signal processing circuit has also been increased one times in the measuring performance and makes the measured differential output capacitance up to 93% of the theoretical values. PMID:28846631
Kronberg, James W.
1994-01-01
A proximity sensor based on a closed field circuit. The circuit comprises a ring oscillator using a symmetrical array of plates that creates an oscillating displacement current. The displacement current varies as a function of the proximity of objects to the plate array. Preferably the plates are in the form of a group of three pair of symmetric plates having a common center, arranged in a hexagonal pattern with opposing plates linked as a pair. The sensor produces logic level pulses suitable for interfacing with a computer or process controller. The proximity sensor can be incorporated into a load cell, a differential pressure gauge, or a device for measuring the consistency of a characteristic of a material where a variation in the consistency causes the dielectric constant of the material to change.
High-Resolution Displacement Sensor Using a SQUID Array Amplifier
NASA Technical Reports Server (NTRS)
Chui, Talso; Penanen, Konstantin; Barmatz, M.; Paik, Ho Jung
2004-01-01
Improvement in the measurement of displacement has profound implications for both exploration technologies and fundamental physics. For planetary exploration, the new SQUID-based capacitive displacement sensor will enable a more sensitive gravity gradiometer for mapping the interior of planets and moons. A new concept of a superfluid clock to be reported by Penanen and Chui at this workshop is also based on a high-resolution displacement sensor. Examples of high-impact physics projects that can benefit from a better displacement sensor are: detection of gravitational waves, test of the equivalence principle, search for the postulated "axion" particle, and test of the inverse square law of gravity. We describe the concept of a new displacement sensor that makes use of a recent development in the Superconducting Quantum Interference Device (SQUID) technology. The SQUID array amplifier, invented by Welty and Martinis (IEEE Trans. Appl. Superconductivity 3, 2605, 1993), has about the same noise as a conventional SQUID; however, it can work at a much higher frequency of up to 5 MHz. We explain how the higher bandwidth can be translated into higher resolution using a bridge-balancing scheme that can simultaneously balance out both the carrier signal at the bridge output and the electrostatic force acting on the test mass.
NASA Astrophysics Data System (ADS)
Cai, Yindi; Chen, Yuan-Liu; Xu, Malu; Shimizu, Yuki; Ito, So; Matsukuma, Hiraku; Gao, Wei
2018-05-01
Precision replication of the diamond tool cutting edge is required for non-destructive tool metrology. This paper presents an ultra-precision tool nanoindentation instrument designed and constructed for replication of the cutting edge of a single point diamond tool onto a selected soft metal workpiece by precisely indenting the tool cutting edge into the workpiece surface. The instrument has the ability to control the indentation depth with a nanometric resolution, enabling the replication of tool cutting edges with high precision. The motion of the diamond tool along the indentation direction is controlled by the piezoelectric actuator of a fast tool servo (FTS). An integrated capacitive sensor of the FTS is employed to detect the displacement of the diamond tool. The soft metal workpiece is attached to an aluminum cantilever whose deflection is monitored by another capacitive sensor, referred to as an outside capacitive sensor. The indentation force and depth can be accurately evaluated from the diamond tool displacement, the cantilever deflection and the cantilever spring constant. Experiments were carried out by replicating the cutting edge of a single point diamond tool with a nose radius of 2.0 mm on a copper workpiece surface. The profile of the replicated tool cutting edge was measured using an atomic force microscope (AFM). The effectiveness of the instrument in precision replication of diamond tool cutting edges is well-verified by the experimental results.
Kronberg, J.W.
1994-05-31
A proximity sensor based on a closed field circuit is disclosed. The circuit comprises a ring oscillator using a symmetrical array of plates that creates an oscillating displacement current. The displacement current varies as a function of the proximity of objects to the plate array. Preferably the plates are in the form of a group of three pair of symmetric plates having a common center, arranged in a hexagonal pattern with opposing plates linked as a pair. The sensor produces logic level pulses suitable for interfacing with a computer or process controller. The proximity sensor can be incorporated into a load cell, a differential pressure gauge, or a device for measuring the consistency of a characteristic of a material where a variation in the consistency causes the dielectric constant of the material to change. 14 figs.
Calibration and optimization of an x-ray bendable mirror using displacement-measuring sensors.
Vannoni, Maurizio; Martín, Idoia Freijo; Music, Valerija; Sinn, Harald
2016-07-25
We propose a method to control and to adjust in a closed-loop a bendable x-ray mirror using displacement-measuring devices. For this purpose, the usage of capacitive and interferometric sensors is investigated and compared. We installed the sensors in a bender setup and used them to continuously measure the position and shape of the mirror in the lab. The sensors are vacuum-compatible such that the same concept can also be applied in final conditions. The measurement is used to keep the calibration of the system and to create a closed-loop control compensating for external influences: in a demonstration measurement, using a 950 mm long bendable mirror, the mirror sagitta is kept stable inside a range of 10 nm Peak-To-Valley (P-V).
Thin-Layer Composite Unimorph Ferroelectric Driver Sensor Properties
NASA Technical Reports Server (NTRS)
Mossi, Karla M.; Selby, Gregory V.; Bryant, Robert G.
1998-01-01
Tests were conducted on 13 different configurations of a new class of piezoelectric devices called THUNDER (thin layer composite unimorph ferroelectric driver and sensor). These configurations consisted of a combination of 1, 3, 5, 7, and 9 layers of 25.4 micron thick aluminium as a backing material, with and without a top layer of 25.4 micrometer aluminum. All of these configurations used the same piezoelectric ceramic wafer (PZT-5A) with dimensions of 5.08 x 3.81 x 0.018 cm. The above configurations were tested at two stages of the manufacturing process: before and after repoling. The parameters measured included frequency, driving voltage. displacement, capacitance, and radius of curvature. An optic sensor recorded the displacement at a fixed voltage(100 - 400 V peak to peak) over a predetermined frequency range (1 - 1000 Hz). These displacement measurements were performed using a computer that controlled the process of activating and measuring the displacement of the device. A parameter alpha was defined which can be used to predict the which configuration will produce the most displacement for a free standing device.
NASA Technical Reports Server (NTRS)
Golbabaei-Asl, M.; Knight, D.; Wilkinson, S.
2013-01-01
The thermal efficiency of a SparkJet is evaluated by measuring the impulse response of a pendulum subject to a single spark discharge. The SparkJet is attached to the end of a pendulum. A laser displacement sensor is used to measure the displacement of the pendulum upon discharge. The pendulum motion is a function of the fraction of the discharge energy that is channeled into the heating of the gas (i.e., increasing the translational-rotational temperature). A theoretical perfect gas model is used to estimate the portion of the energy from the heated gas that results in equivalent pendulum displacement as in the experiment. The earlier results from multiple runs for different capacitances of C = 3, 5, 10, 20, and 40(micro)F demonstrate that the thermal efficiency decreases with higher capacitive discharges.1 In the current paper, results from additional run cases have been included and confirm the previous results
Zheng, Panpan; Liu, Jinquan; Li, Zhu; Liu, Huafeng
2017-01-01
Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/√Hz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/√Hz at 1Hz. The earthquake that occurred in Taiwan was also detected during a continuous gravity measurement. PMID:28930176
Modeling of electrical capacitance tomography with the use of complete electrode model
NASA Astrophysics Data System (ADS)
Fang, Weifu
2016-10-01
We introduce the complete electrode model in the modeling of electrical capacitance tomography (ECT), which extends the model with the commonly used model for electrodes. We show that the solution of the complete electrode model approaches the solution of the corresponding common electrode model as the impedance effect on the electrodes vanishes. We also derive the nonlinear relation between capacitance and permitivity and the sensitivity maps with respect to both the permittivity and the impedance constants, and present a finite difference scheme in polar coordinates for the case of circular ECT sensors that retains the continuity of displacement current with piecewise-constant permitivities.
Closed-field capacitive liquid level sensor
Kronberg, James W.
1998-01-01
A liquid level sensor based on a closed field circuit comprises a ring oscillator using a symmetrical array of plate units that creates a displacement current. The displacement current varies as a function of the proximity of a liquid to the plate units. The ring oscillator circuit produces an output signal with a frequency inversely proportional to the presence of a liquid. A continuous liquid level sensing device and a two point sensing device are both proposed sensing arrangements. A second set of plates may be located inside of the probe housing relative to the sensing plate units. The second set of plates prevent any interference between the sensing plate units.
Closed-field capacitive liquid level sensor
Kronberg, J.W.
1998-03-03
A liquid level sensor based on a closed field circuit comprises a ring oscillator using a symmetrical array of plate units that creates a displacement current. The displacement current varies as a function of the proximity of a liquid to the plate units. The ring oscillator circuit produces an output signal with a frequency inversely proportional to the presence of a liquid. A continuous liquid level sensing device and a two point sensing device are both proposed sensing arrangements. A second set of plates may be located inside of the probe housing relative to the sensing plate units. The second set of plates prevent any interference between the sensing plate units. 12 figs.
Closed-field capacitive liquid level sensor
Kronberg, J.W.
1995-01-01
A liquid level sensor based on a closed field circuit comprises a ring oscillator using a symmetrical array of plate units that creates a displacement current. The displacement current varies as a function of the proximity of a liquid to the plate units. The ring oscillator circuit produces an output signal with a frequency inversely proportional to the presence of a liquid. A continuous liquid level sensing device and a two point sensing device are both proposed sensing arrangements. A second set of plates may be located inside of the probe housing relative to the sensing plate units. The second set of plates prevent any interference between the sensing plate units.
NASA Astrophysics Data System (ADS)
Li, Xingchang; Zhang, Zhiyu; Hu, Haifei; Li, Yingjie; Xiong, Ling; Zhang, Xuejun; Yan, Jiwang
2018-04-01
On-machine measurements can improve the form accuracy of optical surfaces in single-point diamond turning applications; however, commercially available linear variable differential transformer sensors are inaccurate and can potentially scratch the surface. We present an on-machine measurement system based on capacitive displacement sensors for high-precision optical surfaces. In the proposed system, a position-trigger method of measurement was developed to ensure strict correspondence between the measurement points and the measurement data with no intervening time-delay. In addition, a double-sensor measurement was proposed to reduce the electric signal noise during spindle rotation. Using the proposed system, the repeatability of 80-nm peak-to-valley (PV) and 8-nm root-mean-square (RMS) was achieved through analyzing four successive measurement results. The accuracy of 109-nm PV and 14-nm RMS was obtained by comparing with the interferometer measurement result. An aluminum spherical mirror with a diameter of 300 mm was fabricated, and the resulting measured form error after one compensation cut was decreased to 254 nm in PV and 52 nm in RMS. These results confirm that the measurements of the surface form errors were successfully used to modify the cutting tool path during the compensation cut, thereby ensuring that the diamond turning process was more deterministic. In addition, the results show that the noise level was significantly reduced with the reference sensor even under a high rotational speed.
Tsai, Tsung-Heng; Tsai, Hao-Cheng; Wu, Tien-Keng
2014-10-01
This paper presents a capacitive tactile sensor fabricated in a standard CMOS process. Both of the sensor and readout circuits are integrated on a single chip by a TSMC 0.35 μm CMOS MEMS technology. In order to improve the sensitivity, a T-shaped protrusion is proposed and implemented. This sensor comprises the metal layer and the dielectric layer without extra thin film deposition, and can be completed with few post-processing steps. By a nano-indenter, the measured spring constant of the T-shaped structure is 2.19 kNewton/m. Fully differential correlated double sampling capacitor-to-voltage converter (CDS-CVC) and reference capacitor correction are utilized to compensate process variations and improve the accuracy of the readout circuits. The measured displacement-to-voltage transductance is 7.15 mV/nm, and the sensitivity is 3.26 mV/μNewton. The overall power dissipation is 132.8 μW.
A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology
NASA Astrophysics Data System (ADS)
Yi, Zhenxiang; Liao, Xiaoping
2013-03-01
In this paper, a novel capacitive power sensor based on the microelectromechanical systems (MEMS) cantilever beam at 8-12 GHz is proposed, fabricated and tested. The presented design can not only realize a cantilever beam instead of the conventional fixed-fixed beam, but also provide fine compatibility with the GaAs monolithic microwave integrated circuit (MMIC) process. When the displacement of the cantilever beam is very small compared with the initial height of the air gap, the capacitance change between the measuring electrode and the cantilever beam has an approximately linear dependence on the incident radio frequency (RF) power. Impedance compensating technology, by modifying the slot width of the coplanar waveguide transmission line, is adopted to minimize the effect of the cantilever beam on the power sensor; its validity is verified by the simulation of high frequency structure simulator software. The power sensor has been fabricated successfully by Au surface micromachining using polyimide as the sacrificial layer on the GaAs substrate. Optimization of the design with impedance compensating technology has resulted in a measured return loss of less than -25 dB and an insertion loss of around 0.1 dB at 8-12 GHz, which shows the slight effect of the cantilever beam on the microwave performance of this power sensor. The measured capacitance change starts from 0.7 fF to 1.3 fF when the incident RF power increases from 100 to 200 mW and an approximate linear dependence has been obtained. The measured sensitivities of the sensor are about 6.16, 6.27 and 6.03 aF mW-1 at 8, 10 and 12 GHz, respectively.
Hsieh, Hung-Lin; Pan, Ssu-Wen
2015-02-09
A grating-based interferometer for 6-DOF displacement and angle measurement is proposed in this study. The proposed interferometer is composed of three identical detection parts sharing the same light source. Each detection part utilizes three techniques: heterodyne, grating shearing, and Michelson interferometries. Displacement information in the three perpendicular directions (X, Y, Z) can be sensed simultaneously by each detection part. Furthermore, angle information (θX, θY, θZ) can be obtained by comparing the displacement measurement results between two corresponding detection parts. The feasibility and performance of the proposed grating-based interferometer are evaluated in displacement and angle measurement experiments. In comparison with the internal capacitance sensor built into the commercial piezo-stage, the measurement resolutions of the displacement and angle of our proposed interferometer are about 2 nm and 0.05 μrad.
Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.
Chen, Tao; Wang, Yaqiong; Liu, Huicong; Yang, Zhan; Wang, Pengbo; Sun, Lining
2017-01-28
Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal structure. The combination of a nano-positioning stage and a feedback capacitive comb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is used to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis and experimental verification, better static performance and smaller kinetic coupling are achieved. The output displacement of the system achieves a long-stroke of up to 14.7 μm and high-resolution of less than 3 nm. It provides a flexible and efficient way in the design and optimization of the nano-positioning system.
Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor
Chen, Tao; Wang, Yaqiong; Liu, Huicong; Yang, Zhan; Wang, Pengbo; Sun, Lining
2017-01-01
Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal structure. The combination of a nano-positioning stage and a feedback capacitive comb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is used to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis and experimental verification, better static performance and smaller kinetic coupling are achieved. The output displacement of the system achieves a long-stroke of up to 14.7 μm and high-resolution of less than 3 nm. It provides a flexible and efficient way in the design and optimization of the nano-positioning system. PMID:28134854
NASA Astrophysics Data System (ADS)
Cui, Yan; Liao, Xiaoping
2012-05-01
In the work, modeling and design of a capacitive microwave power sensor employing the MEMS plate with clamped-clamped and free-free edges are presented. A novel analytical model of the sensor is established in detail. Through the function of mode shapes presented, the natural frequency can be solved by the Rayleigh-Ritz method. And based on the generalized coordinate introduced, the displacement of the plate with the irradiation of microwave power can be solved. Furthermore, the sensitivity for the power is also derived. Then the detailed consideration of the design and simulation of the microwave characteristic of the sensor are also presented. The linearly graded ground planar in the coplanar waveguide is employed to avoid step discontinuity. The fabrication process is compatible with GaAs MMIC technology completely, also described in detail. The measurement of the proposed sensor indicates a sensitivity of 7.2 fF W-1 and superior return and insertion losses (S11 and S21), less than -22.16 dB and -0.25 dB, respectively, up to 12 GHz, suggesting that it can be available for microwave power detecting in the X-band frequency range.
Effect of noncovalent basal plane functionalization on the quantum capacitance in graphene.
Ebrish, Mona A; Olson, Eric J; Koester, Steven J
2014-07-09
The concentration-dependent density of states in graphene allows the capacitance in metal-oxide-graphene structures to be tunable with the carrier concentration. This feature allows graphene to act as a variable capacitor (varactor) that can be utilized for wireless sensing applications. Surface functionalization can be used to make graphene sensitive to a particular species. In this manuscript, the effect on the quantum capacitance of noncovalent basal plane functionalization using 1-pyrenebutanoic acid succimidyl ester and glucose oxidase is reported. It is found that functionalized samples tested in air have (1) a Dirac point similar to vacuum conditions, (2) increased maximum capacitance compared to vacuum but similar to air, (3) and quantum capacitance "tuning" that is greater than that in vacuum and ambient atmosphere. These trends are attributed to reduced surface doping and random potential fluctuations as a result of the surface functionalization due to the displacement of H2O on the graphene surface and intercalation of a stable H2O layer beneath graphene that increases the overall device capacitance. The results are important for future application of graphene as a platform for wireless chemical and biological sensors.
Piezoresistive cantilever force-clamp system
DOE Office of Scientific and Technical Information (OSTI.GOV)
Park, Sung-Jin; Petzold, Bryan C.; Pruitt, Beth L.
2011-04-15
We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or ''clamps'' the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in capacitive sensor of a piezoelectric actuator as a displacement sensor, such that sample indentation depth can be directly calculated from the force and displacement signals. A programmable real-time controller operating at 100 kHz feedback calculates the driving voltage of the actuator. The system has two distinct modes: a force-clamp mode that controls the force applied to amore » sample and a displacement-clamp mode that controls the moving distance of the actuator. We demonstrate that the system has a large dynamic range (sub-nN up to tens of {mu}N force and nm up to tens of {mu}m displacement) in both air and water, and excellent dynamic response (fast response time, <2 ms and large bandwidth, 1 Hz up to 1 kHz). In addition, the system has been specifically designed to be integrated with other instruments such as a microscope with patch-clamp electronics. We demonstrate the capabilities of the system by using it to calibrate the stiffness and sensitivity of an electrostatic actuator and to measure the mechanics of a living, freely moving Caenorhabditis elegans nematode.« less
Piezoresistive cantilever force-clamp system
Park, Sung-Jin; Petzold, Bryan C.; Goodman, Miriam B.; Pruitt, Beth L.
2011-01-01
We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or “clamps” the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in capacitive sensor of a piezoelectric actuator as a displacement sensor, such that sample indentation depth can be directly calculated from the force and displacement signals. A programmable real-time controller operating at 100 kHz feedback calculates the driving voltage of the actuator. The system has two distinct modes: a force-clamp mode that controls the force applied to a sample and a displacement-clamp mode that controls the moving distance of the actuator. We demonstrate that the system has a large dynamic range (sub-nN up to tens of μN force and nm up to tens of μm displacement) in both air and water, and excellent dynamic response (fast response time, <2 ms and large bandwidth, 1 Hz up to 1 kHz). In addition, the system has been specifically designed to be integrated with other instruments such as a microscope with patch-clamp electronics. We demonstrate the capabilities of the system by using it to calibrate the stiffness and sensitivity of an electrostatic actuator and to measure the mechanics of a living, freely moving Caenorhabditis elegans nematode. PMID:21529009
L-C Measurement Acquisition Method for Aerospace Systems
NASA Technical Reports Server (NTRS)
Woodard, Stanley E.; Taylor, B. Douglas; Shams, Qamar A.; Fox, Robert L.
2003-01-01
This paper describes a measurement acquisition method for aerospace systems that eliminates the need for sensors to have physical connection to a power source (i.e., no lead wires) or to data acquisition equipment. Furthermore, the method does not require the sensors to be in proximity to any form of acquisition hardware. Multiple sensors can be interrogated using this method. The sensors consist of a capacitor, C(p), whose capacitance changes with changes to a physical property, p, electrically connected to an inductor, L. The method uses an antenna to broadcast electromagnetic energy that electrically excites one or more inductive-capacitive sensors via Faraday induction. This method facilitates measurements that were not previously possible because there was no practical means of providing power and data acquisition electrical connections to a sensor. Unlike traditional sensors, which measure only a single physical property, the manner in which the sensing element is interrogated simultaneously allows measurement of at least two unrelated physical properties (e.g., displacement rate and fluid level) by using each constituent of the L-C element. The key to using the method for aerospace applications is to increase the distance between the L-C elements and interrogating antenna; develop all key components to be non-obtrusive and to develop sensing elements that can easily be implemented. Techniques that have resulted in increased distance between antenna and sensor will be presented. Fluid-level measurements and pressure measurements using the acquisition method are demonstrated in the paper.
NASA Astrophysics Data System (ADS)
Lü, Xiaozhou; Xie, Kai; Xue, Dongfeng; Zhang, Feng; Qi, Liang; Tao, Yebo; Li, Teng; Bao, Weimin; Wang, Songlin; Li, Xiaoping; Chen, Renjie
2017-10-01
Micro-capacitance sensors are widely applied in industrial applications for the measurement of mechanical variations. The measurement accuracy of micro-capacitance sensors is highly dependent on the capacitance measurement circuit. To overcome the inability of commonly used methods to directly measure capacitance variation and deal with the conflict between the measurement range and accuracy, this paper presents a capacitance variation measurement method which is able to measure the output capacitance variation (relative value) of the micro-capacitance sensor with a continuously variable measuring range. We present the principles and analyze the non-ideal factors affecting this method. To implement the method, we developed a capacitance variation measurement circuit and carried out experiments to test the circuit. The result shows that the circuit is able to measure a capacitance variation range of 0-700 pF linearly with a maximum relative accuracy of 0.05% and a capacitance range of 0-2 nF (with a baseline capacitance of 1 nF) with a constant resolution of 0.03%. The circuit is proposed as a new method to measure capacitance and is expected to have applications in micro-capacitance sensors for measuring capacitance variation with a continuously variable measuring range.
Ahmadi, Mahdi; Rajamani, Rajesh; Sezen, Serdar
2017-10-01
Capacitive micro-sensors such as accelerometers, gyroscopes and pressure sensors are increasingly used in the modern electronic world. However, the in vivo use of capacitive sensing for measurement of pressure or other variables inside a human body suffers from significant errors due to stray capacitance. This paper proposes a solution consisting of a transparent thin flexible Faraday cage that surrounds the sensor. By supplying the active sensing voltage simultaneously to the deformable electrode of the capacitive sensor and to the Faraday cage, the stray capacitance during in vivo measurements can be largely eliminated. Due to the transparency of the Faraday cage, the top and bottom portions of a capacitive sensor can be accurately aligned and assembled together. Experimental results presented in the paper show that stray capacitance is reduced by a factor of 10 by the Faraday cage, when the sensor is subjected to a full immersion in water.
Karimov, K S; Qazi, I; Khan, T A; Draper, P H; Khalid, F A; Mahroof-Tahir, M
2008-06-01
In this investigation properties of organic semiconductor copper phthalocyanine (CuPc) capacitive humidity and illumination sensors were studied. Organic thin film was deposited by vacuum evaporation on a glass substrate with silver surface-type electrodes to form the Ag/CuPc/Ag sensor. The capacitance of the samples was evaluated at room temperature in the relative humidity range of 35-92%. It was observed that capacitance of the Ag/CuPc/Ag sensor increases with increase in humidity. The ratio of the relative capacitance to relative humidity was about 200. It is assumed that in general the capacitive response of the sensor is associated with polarization due to absorption of water molecules and transfer of charges (electrons and holes). It was observed that under filament lamp illumination of up to 1,000 lx the capacitance of the Ag/CuPc/Ag photo capacitive detectors increased continuously by 20% as compared to dark condition. It is assumed that photo capacitive response of the sensor is associated with polarization due to transfer of photo-generated electrons and holes. An equivalent circuit of the Ag/CuPc/Ag capacitive humidity and illumination sensor was developed. Humidity and illumination dependent capacitance properties of this sensor make it attractive for use in humidity and illumination multi-meters. The sensor may be used in instruments for environmental monitoring of humidity and illumination.
Active Targets For Capacitive Proximity Sensors
NASA Technical Reports Server (NTRS)
Jenstrom, Del T.; Mcconnell, Robert L.
1994-01-01
Lightweight, low-power active targets devised for use with improved capacitive proximity sensors described in "Capacitive Proximity Sensor Has Longer Range" (GSC-13377), and "Capacitive Proximity Sensors With Additional Driven Shields" (GSC-13475). Active targets are short-distance electrostatic beacons; they generate known alternating electro-static fields used for alignment and/or to measure distances.
The VBB SEIS experiment of InSight
NASA Astrophysics Data System (ADS)
De Raucourt, Sebastien; Gabsi, Taoufik; Tanguy, Nebut; Mimoun, David; Lognonne, Philippe; Gagnepain-Beyneix, Jeannine; Banerdt, William; Tillier, Sylvain; Hurst, Kenneth
2012-07-01
SEIS is the core payload of InSight, one of the three missions selected for competitive phase A in the frame of the 2010 Discovery AO. It aims at providing unique observation of the interior structure of Mars and to monitor seismic activity of Mars. SEIS will provide the first seismic model from another planet than Earth. SEIS is an hybrid seismometer composed of 3 SPs and 3 VBBs axes providing ground motion measurement from Dc to 50Hz. A leveling system will ensure the coupling between the ground and the sensors as well as the horizontality of the VBB sphere. This assembly will be deployed on the ground of Mars and will be shielded by a strong thermal insulation and a wind shield. The 24 bits low noise acquisition electronics will remain in the warm electronic box of the lander with the sensors feedback and leveling system electronics. The VBB sphere enclosed three single axis sensors. Those sensors are based on an inverted leaf spring pendulum, which convert ground acceleration into mobile mass displacement. A capacitive displacement sensor monitors this mass displacement to provide a measurement. A force feedback allows transfer function and sensitivity tuning. The VBB sensor has a very strong heritage from previous project and benefits from recent work to improve its performances. Both the mechanical design and the displacement sensors have optimized to improve performances while reducing technological risk and keeping a high TRL. From those development a self-noise well below 10 ^{-9} m.s ^{-2}/sqrt Hz is expected. Environmental sensitivity of SEIS has been minimized by the design of a very efficient wind and thermal shield. Remaining noise is expected to be very close to the VBB self-noise. Associated sources and budget will be discussed. If InSight is selected to fly in 2016, this experiment will provide very high quality seismic signal measurement with a wider bandwidth, higher sensitivity and lower noise than previous Mars seismometer (Viking and Optimism/Mars 96).
Wireless Open-Circuit In-Plane Strain and Displacement Sensor Requiring No Electrical Connections
NASA Technical Reports Server (NTRS)
Woodard, Stanley E. (Inventor)
2014-01-01
A wireless in-plane strain and displacement sensor includes an electrical conductor fixedly coupled to a substrate subject to strain conditions. The electrical conductor is shaped between its ends for storage of an electric field and a magnetic field, and remains electrically unconnected to define an unconnected open-circuit having inductance and capacitance. In the presence of a time-varying magnetic field, the electrical conductor so-shaped resonates to generate harmonic electric and magnetic field responses. The sensor also includes at least one electrically unconnected electrode having an end and a free portion extending from the end thereof. The end of each electrode is fixedly coupled to the substrate and the free portion thereof remains unencumbered and spaced apart from a portion of the electrical conductor so-shaped. More specifically, at least some of the free portion is disposed at a location lying within the magnetic field response generated by the electrical conductor. A motion guidance structure is slidingly engaged with each electrode's free portion in order to maintain each free portion parallel to the electrical conductor so-shaped.
Turbine rotor disk health monitoring assessment based on sensor technology and spin tests data.
Abdul-Aziz, Ali; Woike, Mark
2013-01-01
The paper focuses on presenting data obtained from spin test experiments of a turbine engine like rotor disk and assessing their correlation to the development of a structural health monitoring and fault detection system. The data were obtained under various operating conditions such as the rotor disk being artificially induced with and without a notch and rotated at a rotational speed of up to 10,000 rpm under balanced and imbalanced state. The data collected included blade tip clearance, blade tip timing measurements, and shaft displacements. Two different sensor technologies were employed in the testing: microwave and capacitive sensors, respectively. The experimental tests were conducted at the NASA Glenn Research Center's Rotordynamics Laboratory using a high precision spin system. Disk flaw observations and related assessments from the collected data for both sensors are reported and discussed.
Bai, Yang; Lu, Yunfeng; Hu, Pengcheng; Wang, Gang; Xu, Jinxin; Zeng, Tao; Li, Zhengkun; Zhang, Zhonghua; Tan, Jiubin
2016-01-01
A simple differential capacitive sensor is provided in this paper to measure the absolute positions of length measuring systems. By utilizing a shield window inside the differential capacitor, the measurement range and linearity range of the sensor can reach several millimeters. What is more interesting is that this differential capacitive sensor is only sensitive to one translational degree of freedom (DOF) movement, and immune to the vibration along the other two translational DOFs. In the experiment, we used a novel circuit based on an AC capacitance bridge to directly measure the differential capacitance value. The experimental result shows that this differential capacitive sensor has a sensitivity of 2 × 10−4 pF/μm with 0.08 μm resolution. The measurement range of this differential capacitive sensor is 6 mm, and the linearity error are less than 0.01% over the whole absolute position measurement range. PMID:27187393
Development of a Capacitive Ice Sensor to Measure Ice Growth in Real Time
Zhi, Xiang; Cho, Hyo Chang; Wang, Bo; Ahn, Cheol Hee; Moon, Hyeong Soon; Go, Jeung Sang
2015-01-01
This paper presents the development of the capacitive sensor to measure the growth of ice on a fuel pipe surface in real time. The ice sensor consists of pairs of electrodes to detect the change in capacitance and a thermocouple temperature sensor to examine the ice formation situation. In addition, an environmental chamber was specially designed to control the humidity and temperature to simulate the ice formation conditions. From the humidity, a water film is formed on the ice sensor, which results in an increase in capacitance. Ice nucleation occurs, followed by the rapid formation of frost ice that decreases the capacitance suddenly. The capacitance is saturated. The developed ice sensor explains the ice growth providing information about the icing temperature in real time. PMID:25808770
Development of a capacitive ice sensor to measure ice growth in real time.
Zhi, Xiang; Cho, Hyo Chang; Wang, Bo; Ahn, Cheol Hee; Moon, Hyeong Soon; Go, Jeung Sang
2015-03-19
This paper presents the development of the capacitive sensor to measure the growth of ice on a fuel pipe surface in real time. The ice sensor consists of pairs of electrodes to detect the change in capacitance and a thermocouple temperature sensor to examine the ice formation situation. In addition, an environmental chamber was specially designed to control the humidity and temperature to simulate the ice formation conditions. From the humidity, a water film is formed on the ice sensor, which results in an increase in capacitance. Ice nucleation occurs, followed by the rapid formation of frost ice that decreases the capacitance suddenly. The capacitance is saturated. The developed ice sensor explains the ice growth providing information about the icing temperature in real time.
NASA Technical Reports Server (NTRS)
Scardelletti, M.; Neudeck, P.; Spry, D.; Meredith, R.; Jordan, J.; Prokop, N.; Krasowski, M.; Beheim, G.; Hunter, G.
2017-01-01
This paper describes initial development and testing of a novel high temperature capacitive pressure sensor system. The pressure sensor system consists of two 4H-SiC 11-stage ring oscillators and a SiCN capacitive pressure sensor. One oscillator has the capacitive pressure sensor fixed at one node in its feedback loop and varies as a function of pressure and temperature while the other provides a pressure-independent reference frequency which can be used to temperature compensate the output of the first oscillator. A two-day repeatability test was performed up to 500C on the oscillators and the oscillator fundamental frequency changed by only 1. The SiCN capacitive pressure sensor was characterized at room temperature from 0 to 300 psi. The sensor had an initial capacitance of 3.76 pF at 0 psi and 1.75 pF at 300 psi corresponding to a 54 change in capacitance. The integrated pressure sensor system was characterized from 0 to 300 psi in steps of 50 psi over a temperature range of 25 to 500C. The pressure sensor system sensitivity was 0.113 kHzpsi at 25C and 0.026 kHzpsi at 500C.
A numerical method for measuring capacitive soft sensors through one channel
NASA Astrophysics Data System (ADS)
Tairych, Andreas; Anderson, Iain A.
2018-03-01
Soft capacitive stretch sensors are well suited for unobtrusive wearable body motion capture. Conventional sensing methods measure sensor capacitances through separate channels. In sensing garments with many sensors, this results in high wiring complexity, and a large footprint of rigid sensing circuit boards. We have developed a more efficient sensing method that detects multiple sensors through only one channel, and one set of wires. It is based on a R-C transmission line assembled from capacitive conductive fabric stretch sensors, and external resistors. The unknown capacitances are identified by solving a system of nonlinear equations. These equations are established by modelling and continuously measuring transmission line reactances at different frequencies. Solving these equations numerically with a Newton-Raphson solver for the unknown capacitances enables real time reading of all sensors. The method was verified with a prototype comprising three sensors that is capable of detecting both individually and simultaneously stretched sensors. Instead of using three channels and six wires to detect the sensors, the task was achieved with only one channel and two wires.
Eaton, William P.; Staple, Bevan D.; Smith, James H.
2000-01-01
A microelectromechanical (MEM) capacitance pressure sensor integrated with electronic circuitry on a common substrate and a method for forming such a device are disclosed. The MEM capacitance pressure sensor includes a capacitance pressure sensor formed at least partially in a cavity etched below the surface of a silicon substrate and adjacent circuitry (CMOS, BiCMOS, or bipolar circuitry) formed on the substrate. By forming the capacitance pressure sensor in the cavity, the substrate can be planarized (e.g. by chemical-mechanical polishing) so that a standard set of integrated circuit processing steps can be used to form the electronic circuitry (e.g. using an aluminum or aluminum-alloy interconnect metallization).
Manginell, Ronald P; Moorman, Matthew W; Wheeler, David R
2014-05-27
A microfabricated capacitive chemical sensor can be used as an autonomous chemical sensor or as an analyte-sensitive chemical preconcentrator in a larger microanalytical system. The capacitive chemical sensor detects changes in sensing film dielectric properties, such as the dielectric constant, conductivity, or dimensionality. These changes result from the interaction of a target analyte with the sensing film. This capability provides a low-power, self-heating chemical sensor suitable for remote and unattended sensing applications. The capacitive chemical sensor also enables a smart, analyte-sensitive chemical preconcentrator. After sorption of the sample by the sensing film, the film can be rapidly heated to release the sample for further analysis. Therefore, the capacitive chemical sensor can optimize the sample collection time prior to release to enable the rapid and accurate analysis of analytes by a microanalytical system.
Biomedical applications of a commercial capacitance transducer.
DOT National Transportation Integrated Search
1968-03-01
A capacitive displacement transducer with a linear response and constant sensitivity for a frequency range of 0-1,000 Hz is described. Its application to measurement of chest wall motions was verified using static displacements from flat and curved s...
Fiber-linked interferometric pressure sensor
NASA Technical Reports Server (NTRS)
Beheim, G.; Fritsch, K.; Poorman, R. N.
1987-01-01
A fiber-optic pressure sensor is described which uses a diaphragm to modulate the mirror separation of a Fabry-Perot cavity (the sensing cavity). A multimode optical fiber delivers broadband light to the sensing cavity and returns the spectrally modulated light which the cavity reflects. The sensor's output spectrum is analyzed using a tunable Fabry-Perot cavity (the reference cavity) to determine the mismatch in the mirror separations of the two cavities. An electronic servo control uses this result to cause the mirror separation of the reference cavity to equal that of the sensing cavity. The displacement of the pressure-sensing diaphragm is then obtained by measuring the capacitance of the reference cavity's metal-coated mirrors. Relative to other fiber-optic sensors, an important advantage of this instrument is its high immunity to the effects of variations in both the transmissivity of the fiber link and the wavelength of the optical source.
Turbine Rotor Disk Health Monitoring Assessment Based on Sensor Technology and Spin Tests Data
2013-01-01
The paper focuses on presenting data obtained from spin test experiments of a turbine engine like rotor disk and assessing their correlation to the development of a structural health monitoring and fault detection system. The data were obtained under various operating conditions such as the rotor disk being artificially induced with and without a notch and rotated at a rotational speed of up to 10,000 rpm under balanced and imbalanced state. The data collected included blade tip clearance, blade tip timing measurements, and shaft displacements. Two different sensor technologies were employed in the testing: microwave and capacitive sensors, respectively. The experimental tests were conducted at the NASA Glenn Research Center's Rotordynamics Laboratory using a high precision spin system. Disk flaw observations and related assessments from the collected data for both sensors are reported and discussed. PMID:23844396
Measurement of Gas-Liquid Two-Phase Flow in Micro-Pipes by a Capacitance Sensor
Ji, Haifeng; Li, Huajun; Huang, Zhiyao; Wang, Baoliang; Li, Haiqing
2014-01-01
A capacitance measurement system is developed for the measurement of gas-liquid two-phase flow in glass micro-pipes with inner diameters of 3.96, 2.65 and 1.56 mm, respectively. As a typical flow regime in a micro-pipe two-phase flow system, slug flow is chosen for this investigation. A capacitance sensor is designed and a high-resolution and high-speed capacitance measurement circuit is used to measure the small capacitance signals based on the differential sampling method. The performance and feasibility of the capacitance method are investigated and discussed. The capacitance signal is analyzed, which can reflect the voidage variation of two-phase flow. The gas slug velocity is determined through a cross-correlation technique using two identical capacitance sensors. The simulation and experimental results show that the presented capacitance measurement system is successful. Research work also verifies that the capacitance sensor is an effective method for the measurement of gas liquid two-phase flow parameters in micro-pipes. PMID:25587879
Measurement of gas-liquid two-phase flow in micro-pipes by a capacitance sensor.
Ji, Haifeng; Li, Huajun; Huang, Zhiyao; Wang, Baoliang; Li, Haiqing
2014-11-26
A capacitance measurement system is developed for the measurement of gas-liquid two-phase flow in glass micro-pipes with inner diameters of 3.96, 2.65 and 1.56 mm, respectively. As a typical flow regime in a micro-pipe two-phase flow system, slug flow is chosen for this investigation. A capacitance sensor is designed and a high-resolution and high-speed capacitance measurement circuit is used to measure the small capacitance signals based on the differential sampling method. The performance and feasibility of the capacitance method are investigated and discussed. The capacitance signal is analyzed, which can reflect the voidage variation of two-phase flow. The gas slug velocity is determined through a cross-correlation technique using two identical capacitance sensors. The simulation and experimental results show that the presented capacitance measurement system is successful. Research work also verifies that the capacitance sensor is an effective method for the measurement of gas liquid two-phase flow parameters in micro-pipes.
Developments in new fluid rotational seismometers: Instrument performance and future directions
Evans, John R.; Kozák, Jan T.; Jedlicka, Petr
2016-01-01
Most of our results pertain to sensors with water or silicon oil as the proof mass, though we also tested a torsion-bar design with a solid proof mass. We find that most mass–transducer combinations lead to output proportional to rotational acceleration, with varying degrees of fidelity. Most combinations we tested can be dismissed from further development for reasons of performance or inconvenience during analysis of acceleration response (compare with E electronic supplement). In this article, we describe three of the more promising combinations, one each for the three types of response functions we measured. Of these three, one mass–transducer combination in particular (a hinged sensing element and capacitive transduction) has output voltage closely proportional to rotational displacement (angle) over a wide frequency range; such displacement proportionality obviates two of the integration steps normally re- quired to solve for continuum single-point motions or correct for tilt-induced errors in horizontal translational sensors. Thus, although we illustrate two other designs of some promise, we propose a new design that follows this displacement-proportional path while increasing the device’s sensitivity to on-axis rotations, improving its manu- facturing ease and lowering its sensitivity to translational motions.
Mechanical design of a single-axis monolithic accelerometer for advanced seismic attenuation systems
NASA Astrophysics Data System (ADS)
Bertolini, Alessandro; DeSalvo, Riccardo; Fidecaro, Francesco; Francesconi, Mario; Marka, Szabolcs; Sannibale, Virginio; Simonetti, Duccio; Takamori, Akiteru; Tariq, Hareem
2006-01-01
The design and mechanics for a new very-low noise low frequency horizontal accelerometer is presented. The sensor has been designed to be integrated in an advanced seismic isolation system for interferometric gravitational wave detectors. The motion of a small monolithic folded-pendulum (FP) is monitored by a high resolution capacitance displacement sensor; a feedback force actuator keeps the mass at the equilibrium position. The feedback signal is proportional to the ground acceleration in the frequency range 0-150 Hz. The very high mechanical quality factor, Q≃3000 at a resonant frequency of 0.5 Hz, reduces the Brownian motion of the proof mass of the accelerometer below the resolution of the displacement sensor. This scheme enables the accelerometer to detect the inertial displacement of a platform with a root-mean-square noise less than 1 nm, integrated over the frequency band from 0.01 to 150 Hz. The FP geometry, combined with the monolithic design, allows the accelerometer to be extremely directional. A vertical-horizontal coupling ranging better than 10-3 has been achieved. A detailed account of the design and construction of the accelerometer is reported here. The instrument is fully ultra-high vacuum compatible and has been tested and approved for integration in seismic attenuation system of japanese TAMA 300 gravitational wave detector. The monolithic design also makes the accelerometer suitable for cryogenic operation.
Large Capacitance Measurement by Multiple Uses of MBL Charge Sensor
ERIC Educational Resources Information Center
Lee, Jung Sook; Chae, Min; Kim, Jung Bog
2010-01-01
A recent article by Morse described interesting electrostatics experiments using an MBL charge sensor. In this application, the charge sensor has a large capacitance compared to the charged test object, so nearly all charges can be transferred to the sensor capacitor from the capacitor to be measured. However, the typical capacitance of commercial…
Model calibration for a soft elastomeric capacitor sensor considering slippage under fatigue cracks
NASA Astrophysics Data System (ADS)
Kong, Xiangxiong; Li, Jian; Bennett, Caroline; Collins, William; Laflamme, Simon
2016-04-01
A newly-developed soft elastomeric capacitor (SEC) strain sensor has shown promise in fatigue crack monitoring. The SECs exhibit high levels of ductility and hence do not break under excessive strain when the substrate cracks due to slippage or de-bonding between the sensor and epoxy. The actual strain experienced by a SEC depends on the amount of slippage, which is difficult to simulate numerically, making it challenging to accurately predict the response of a SEC near a crack. In this paper, a two-step approach is proposed to simulate the capacitance response of a SEC. First, a finite element (FE) model of a steel compact tension specimen was analyzed under cyclic loading while the cracking process was simulated based on an element removal technique. Second, a rectangular boundary was defined near the crack region. The SEC outside the boundary was assumed to have perfect bond with the specimen, while that inside the boundary was assumed to deform freely due to slippage. A second FE model was then established to simulate the response of the SEC within the boundary subject to displacements at the boundary from the first FE model. The total simulated capacitance was computed from the model results by combining the computed capacitance inside and outside the boundary. The performance of the simulation incorporating slippage was evaluated by comparing the model results with the experimental data from the test performed on a compact tension specimen. The FE model considering slippage showed results that matched the experimental findings more closely than the FE model that did not consider slippage.
A new torsion pendulum for gravitational reference sensor technology development.
Ciani, Giacomo; Chilton, Andrew; Apple, Stephen; Olatunde, Taiwo; Aitken, Michael; Mueller, Guido; Conklin, John W
2017-06-01
We report on the design and sensitivity of a new torsion pendulum for measuring the performance of ultra-precise inertial sensors and for the development of associated technologies for space-based gravitational wave observatories and geodesy missions. The apparatus comprises a 1 m-long, 50 μm-diameter tungsten fiber that supports an inertial member inside a vacuum system. The inertial member is an aluminum crossbar with four hollow cubic test masses at each end. This structure converts the rotation of the torsion pendulum into translation of the test masses. Two test masses are enclosed in capacitive sensors which provide readout and actuation. These test masses are electrically insulated from the rest of the crossbar and their electrical charge is controlled by photoemission using fiber-coupled ultraviolet light emitting diodes. The capacitive readout measures the test mass displacement with a broadband sensitivity of 30 nm∕Hz and is complemented by a laser interferometer with a sensitivity of about 0.5 nm∕Hz. The performance of the pendulum, as determined by the measured residual torque noise and expressed in terms of equivalent force acting on a single test mass, is roughly 200 fN∕Hz around 2 mHz, which is about a factor of 20 above the thermal noise limit of the fiber.
NASA Astrophysics Data System (ADS)
Konishi, Toshifumi; Yamane, Daisuke; Matsushima, Takaaki; Masu, Kazuya; Machida, Katsuyuki; Toshiyoshi, Hiroshi
2014-01-01
This paper reports the design and evaluation results of a capacitive CMOS-MEMS sensor that consists of the proposed sensor circuit and a capacitive MEMS device implemented on the circuit. To design a capacitive CMOS-MEMS sensor, a multi-physics simulation of the electromechanical behavior of both the MEMS structure and the sensing LSI was carried out simultaneously. In order to verify the validity of the design, we applied the capacitive CMOS-MEMS sensor to a MEMS accelerometer implemented by the post-CMOS process onto a 0.35-µm CMOS circuit. The experimental results of the CMOS-MEMS accelerometer exhibited good agreement with the simulation results within the input acceleration range between 0.5 and 6 G (1 G = 9.8 m/s2), corresponding to the output voltages between 908.6 and 915.4 mV, respectively. Therefore, we have confirmed that our capacitive CMOS-MEMS sensor and the multi-physics simulation will be beneficial method to realize integrated CMOS-MEMS technology.
NASA Astrophysics Data System (ADS)
Zolfaghari, Abolfazl; Jeon, Seongkyul; Stepanick, Christopher K.; Lee, ChaBum
2017-06-01
This paper presents a novel method for measuring two-degree-of-freedom (DOF) motion of flexure-based nanopositioning systems based on optical knife-edge sensing (OKES) technology, which utilizes the interference of two superimposed waves: a geometrical wave from the primary source of light and a boundary diffraction wave from the secondary source. This technique allows for two-DOF motion measurement of the linear and pitch motions of nanopositioning systems. Two capacitive sensors (CSs) are used for a baseline comparison with the proposed sensor by simultaneously measuring the motions of the nanopositioning system. The experimental results show that the proposed sensor closely agrees with the fundamental linear motion of the CS. However, the two-DOF OKES technology was shown to be approximately three times more sensitive to the pitch motion than the CS. The discrepancy in the two sensor outputs is discussed in terms of measuring principle, linearity, bandwidth, control effectiveness, and resolution.
Capacitive Sensing of Intercalated H2O Molecules Using Graphene.
Olson, Eric J; Ma, Rui; Sun, Tao; Ebrish, Mona A; Haratipour, Nazila; Min, Kyoungmin; Aluru, Narayana R; Koester, Steven J
2015-11-25
Understanding the interactions of ambient molecules with graphene and adjacent dielectrics is of fundamental importance for a range of graphene-based devices, particularly sensors, where such interactions could influence the operation of the device. It is well-known that water can be trapped underneath graphene and its host substrate; however, the electrical effect of water beneath graphene and the dynamics of how the interfacial water changes with different ambient conditions has not been quantified. Here, using a metal-oxide-graphene variable-capacitor (varactor) structure, we show that graphene can be used to capacitively sense the intercalation of water between graphene and HfO2 and that this process is reversible on a fast time scale. Atomic force microscopy is used to confirm the intercalation and quantify the displacement of graphene as a function of humidity. Density functional theory simulations are used to quantify the displacement of graphene induced by intercalated water and also explain the observed Dirac point shifts as being due to the combined effect of water and oxygen on the carrier concentration in the graphene. Finally, molecular dynamics simulations indicate that a likely mechanism for the intercalation involves adsorption and lateral diffusion of water molecules beneath the graphene.
Pressure sensor for high-temperature liquids
Forster, George A.
1978-01-01
A pressure sensor for use in measuring pressures in liquid at high temperatures, especially such as liquid sodium or liquid potassium, comprises a soft diaphragm in contact with the liquid. The soft diaphragm is coupled mechanically to a stiff diaphragm. Pressure is measured by measuring the displacment of both diaphragms, typically by measuring the capacitance between the stiff diaphragm and a fixed plate when the stiff diaphragm is deflected in response to the measured pressure through mechanical coupling from the soft diaphragm. Absolute calibration is achieved by admitting gas under pressure to the region between diaphragms and to the region between the stiff diaphragm and the fixed plate, breaking the coupling between the soft and stiff diaphragms. The apparatus can be calibrated rapidly and absolutely.
Resonant Magnetic Field Sensors Based On MEMS Technology.
Herrera-May, Agustín L; Aguilera-Cortés, Luz A; García-Ramírez, Pedro J; Manjarrez, Elías
2009-01-01
Microelectromechanical systems (MEMS) technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors exploit the Lorentz force in order to detect external magnetic fields through the displacement of resonant structures, which are measured with optical, capacitive, and piezoresistive sensing techniques. From these, the optical sensing presents immunity to electromagnetic interference (EMI) and reduces the read-out electronic complexity. Moreover, piezoresistive sensing requires an easy fabrication process as well as a standard packaging. A description of the operation mechanisms, advantages and drawbacks of each sensor is considered. MEMS magnetic field sensors are a potential alternative for numerous applications, including the automotive industry, military, medical, telecommunications, oceanographic, spatial, and environment science. In addition, future markets will need the development of several sensors on a single chip for measuring different parameters such as the magnetic field, pressure, temperature and acceleration.
Resonant Magnetic Field Sensors Based On MEMS Technology
Herrera-May, Agustín L.; Aguilera-Cortés, Luz A.; García-Ramírez, Pedro J.; Manjarrez, Elías
2009-01-01
Microelectromechanical systems (MEMS) technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors exploit the Lorentz force in order to detect external magnetic fields through the displacement of resonant structures, which are measured with optical, capacitive, and piezoresistive sensing techniques. From these, the optical sensing presents immunity to electromagnetic interference (EMI) and reduces the read-out electronic complexity. Moreover, piezoresistive sensing requires an easy fabrication process as well as a standard packaging. A description of the operation mechanisms, advantages and drawbacks of each sensor is considered. MEMS magnetic field sensors are a potential alternative for numerous applications, including the automotive industry, military, medical, telecommunications, oceanographic, spatial, and environment science. In addition, future markets will need the development of several sensors on a single chip for measuring different parameters such as the magnetic field, pressure, temperature and acceleration. PMID:22408480
An Annular Mechanical Temperature Compensation Structure for Gas-Sealed Capacitive Pressure Sensor
Hao, Xiuchun; Jiang, Yonggang; Takao, Hidekuni; Maenaka, Kazusuke; Higuchi, Kohei
2012-01-01
A novel gas-sealed capacitive pressure sensor with a temperature compensation structure is reported. The pressure sensor is sealed by Au-Au diffusion bonding under a nitrogen ambient with a pressure of 100 kPa and integrated with a platinum resistor-based temperature sensor for human activity monitoring applications. The capacitance-pressure and capacitance-temperature characteristics of the gas-sealed capacitive pressure sensor without temperature compensation structure are calculated. It is found by simulation that a ring-shaped structure on the diaphragm of the pressure sensor can mechanically suppress the thermal expansion effect of the sealed gas in the cavity. Pressure sensors without/with temperature compensation structures are fabricated and measured. Through measured results, it is verified that the calculation model is accurate. Using the compensation structures with a 900 μm inner radius, the measured temperature coefficient is much reduced as compared to that of the pressure sensor without compensation. The sensitivities of the pressure sensor before and after compensation are almost the same in the pressure range from 80 kPa to 100 kPa. PMID:22969385
Characteristics Study of In-Situ Capacitive Sensor for Monitoring Lubrication Oil Debris.
Han, Zhibin; Wang, Yishou; Qing, Xinlin
2017-12-08
As an essential part of engine health monitoring (EHM), online lubrication oil debris monitoring has recently received great attention for the assessment of rotating and reciprocating parts in aero-engines, due to its high integration, low cost and safe characteristics. However, it is be a challenge to find a suitable sensor operating in such a complex environment. We present an unconventional novel approach, in which a cylinder capacitive sensor is designed and integrated with the pipeline of an engine lubrication system, so that the capacitive sensor can effectively detect changes in the lubrication oil condition. In this paper, an attempt to illustrate the performance characteristics of the developed cylinder capacitive sensor is made, through an experiment system that simulates a real scenario of a lubrication oil system. The main aim of the research was to qualitatively describe the relationship between the sensor parameter and the lubrication oil debris. In addition, the effect of the temperature and flow rate of the lubrication oil on capacitance change was performed by several experiments and we figured out a compensation method. The experimental results demonstrated that the cylinder capacitive sensor can potentially be used for lubrication oil debris monitoring of the health condition of an aero-engine.
Wei, Qun; Kim, Mi-Jung; Lee, Jong-Ha
2018-01-01
Drinking water has several advantages that have already been established, such as improving blood circulation, reducing acid in the stomach, etc. However, due to people not noticing the amount of water they consume every time they drink, most people drink less water than the recommended daily allowance. In this paper, a capacitive sensor for developing an automatic tumbler to measure water level is proposed. Different than in previous studies, the proposed capacitive sensor was separated into two sets: the main sensor for measuring the water level in the tumbler, and the reference sensor for measuring the incremental level unit. In order to confirm the feasibility of the proposed idea, and to optimize the shape of the sensor, a 3D model of the capacitive sensor with the tumbler was designed and subjected to Finite Element Analysis (FEA) simulation. According to the simulation results, the electrodes were made of copper and assembled in a tumbler manufactured by a 3D printer. The tumbler was filled with water and was subjected to experiments in order to assess the sensor's performance. The comparison of experimental results to the simulation results shows that the measured capacitance value of the capacitive sensor changed linearly as the water level varied. This proves that the proposed sensor can accurately measure the water level in the tumbler. Additionally, by use of the curve fitting method, a compensation algorithm was found to match the actual level with the measured level. The experimental results proved that the proposed capacitive sensor is able to measure the actual water level in the tumbler accurately. A digital control part with micro-processor will be designed and fixed on the bottom of the tumbler for developing a smart tumbler.
Capacitive Sensors for Measuring Masses of Cryogenic Fluids
NASA Technical Reports Server (NTRS)
Nurge, Mark; Youngquist, Robert
2003-01-01
An effort is under way to develop capacitive sensors for measuring the masses of cryogenic fluids in tanks. These sensors are intended to function in both microgravitational and normal gravitational settings, and should not be confused with level sensors, including capacitive ones. A sensor of this type is conceptually simple in the sense that (1) it includes only one capacitor and (2) if properly designed, its single capacitance reading should be readily convertible to a close approximation of the mass of the cryogenic fluid in the tank. Consider a pair of electrically insulated electrodes used as a simple capacitive sensor. In general, the capacitance is proportional to the permittivity of the dielectric medium (in this case, a cryogenic fluid) between the electrodes. The success of design and operation of a sensor of the present type depends on the accuracy of the assumption that to a close approximation, the permittivity of the cryogenic fluid varies linearly with the density of the fluid. Data on liquid nitrogen, liquid oxygen, and liquid hydrogen, reported by the National Institute of Standards and Technology, indicate that the permittivities and densities of these fluids are, indeed, linearly related to within a few tenths of a percent over the pressure and temperature regions of interest. Hence, ignoring geometric effects for the moment, the capacitance between two electrodes immersed in the fluid should vary linearly with the density, and, hence, with the mass of the fluid. Of course, it is necessary to take account of the tank geometry. Because most cryogenic tanks do not have uniform cross sections, the readings of level sensors, including capacitive ones, are not linearly correlated with the masses of fluids in the tanks. In a sensor of the present type, the capacitor electrodes are shaped so that at a given height, the capacitance per unit height is approximately proportional to the cross-sectional area of the tank in the horizontal plane at that height (see figure).
Laboratory Connections: Gas Monitoring Transducers: Relative Humidity Sensors.
ERIC Educational Resources Information Center
Powers, Michael H.; Hull, Stacey E.
1988-01-01
Explains the operation of five relative humidity sensors: psychrometer, hair hygrometer, resistance hygrometer, capacitance hygrometer, and resistance-capacitance hygrometer. Outlines the theory behind the electronic sensors and gives computer interfacing information. Lists sensor responses for calibration. (MVL)
DOE Office of Scientific and Technical Information (OSTI.GOV)
Han, Kook In; Lee, In Gyu; Hwang, Wan Sik, E-mail: mhshin@kau.ac.kr, E-mail: whwang@kau.ac.kr
The oxidation properties of graphene oxide (GO) are systematically correlated with their chemical sensing properties. Based on an impedance analysis, the equivalent circuit models of the capacitive sensors are established, and it is demonstrated that capacitive operations are related to the degree of oxidation. This is also confirmed by X-ray diffraction and Raman analysis. Finally, highly sensitive stacked GO sensors are shown to detect humidity in capacitive mode, which can be useful in various applications requiring low power consumption.
Design of capacitive sensor for water level measurement
NASA Astrophysics Data System (ADS)
Qurthobi, A.; Iskandar, R. F.; Krisnatal, A.; Weldzikarvina
2016-11-01
Capacitive sensor for water level detection has been fabricated. It has, typically, high-impedance sensor, particularly at low frequencies, as clear from the impedance (reactance) expression for a capacitor. Also, capacitive sensor is a noncontacting device in the common usage. In this research, water level sensor based on capacitive principal created using two copper plates with height (h), width (b), and distance (l) between two plates, respectively, 0.040 m, 0.015 m, and 0.010 m. 5 V pp 3 kHz AC signal is used as input signal for the system. Dielectric constant between two plates is proportional to water level. Hence, it can be used to determine water level from electrical characteristic as it inversely proportional to sensor impedance. Linearization, inverting amplifier, and rectifier circuits are used as signal conditioning for the system. Based on conducted experiment, the relationship between water level (x), capacitance (C), and output voltage (Vdc ) can be expressed as C(x) = 2.756x + 0.333 nF and Vdc (x) = 15.755 + 0.316 V.
Characteristics Study of In-Situ Capacitive Sensor for Monitoring Lubrication Oil Debris
Han, Zhibin; Wang, Yishou; Qing, Xinlin
2017-01-01
As an essential part of engine health monitoring (EHM), online lubrication oil debris monitoring has recently received great attention for the assessment of rotating and reciprocating parts in aero-engines, due to its high integration, low cost and safe characteristics. However, it is be a challenge to find a suitable sensor operating in such a complex environment. We present an unconventional novel approach, in which a cylinder capacitive sensor is designed and integrated with the pipeline of an engine lubrication system, so that the capacitive sensor can effectively detect changes in the lubrication oil condition. In this paper, an attempt to illustrate the performance characteristics of the developed cylinder capacitive sensor is made, through an experiment system that simulates a real scenario of a lubrication oil system. The main aim of the research was to qualitatively describe the relationship between the sensor parameter and the lubrication oil debris. In addition, the effect of the temperature and flow rate of the lubrication oil on capacitance change was performed by several experiments and we figured out a compensation method. The experimental results demonstrated that the cylinder capacitive sensor can potentially be used for lubrication oil debris monitoring of the health condition of an aero-engine. PMID:29292748
Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip
Dai, Ching-Liang; Lu, Po-Wei; Chang, Chienliu; Liu, Cheng-Yang
2009-01-01
The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consists of 16 sensing cells in parallel. Each sensing cell contains a top electrode and a lower electrode, and the top electrode is a sandwich membrane. The pressure sensor needs a post-CMOS process to release the membranes after completion of the CMOS process. The post-process uses etchants to etch the sacrificial layers, and to release the membranes. The advantages of the post-process include easy execution and low cost. Experimental results reveal that the pressure sensor has a high sensitivity of 7 Hz/Pa in the pressure range of 0–300 kPa. PMID:22303167
Capacitive micro pressure sensor integrated with a ring oscillator circuit on chip.
Dai, Ching-Liang; Lu, Po-Wei; Chang, Chienliu; Liu, Cheng-Yang
2009-01-01
The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consists of 16 sensing cells in parallel. Each sensing cell contains a top electrode and a lower electrode, and the top electrode is a sandwich membrane. The pressure sensor needs a post-CMOS process to release the membranes after completion of the CMOS process. The post-process uses etchants to etch the sacrificial layers, and to release the membranes. The advantages of the post-process include easy execution and low cost. Experimental results reveal that the pressure sensor has a high sensitivity of 7 Hz/Pa in the pressure range of 0-300 kPa.
Polyimide-Based Capacitive Humidity Sensor
Steinmaßl, Matthias; Endres, Hanns-Erik; Drost, Andreas; Eisele, Ignaz; Kutter, Christoph; Müller-Buschbaum, Peter
2018-01-01
The development of humidity sensors with simple transduction principles attracts considerable interest by both scientific researchers and industrial companies. Capacitive humidity sensors, based on polyimide sensing material with different thickness and surface morphologies, are prepared. The surface morphology of the sensing layer is varied from flat to rough and then to nanostructure called nanograss by using an oxygen plasma etch process. The relative humidity (RH) sensor selectively responds to the presence of water vapor by a capacitance change. The interaction between polyimide and water molecules is studied by FTIR spectroscopy. The complete characterization of the prepared capacitive humidity sensor performance is realized using a gas mixing setup and an evaluation kit. A linear correlation is found between the measured capacitance and the RH level in the range of 5 to 85%. The morphology of the humidity sensing layer is revealed as an important parameter influencing the sensor performance. It is proved that a nanograss-like structure is the most effective for detecting RH, due to its rapid response and recovery times, which are comparable to or even better than the ones of commercial polymer-based sensors. This work demonstrates the readiness of the developed RH sensor technology for industrialization. PMID:29751632
NASA Astrophysics Data System (ADS)
Jing, Chao; Liu, Zhongling; Zhou, Ge; Zhang, Yimo
2011-11-01
The nanometer-level precise phase-shift system is designed to realize the phase-shift interferometry in electronic speckle shearography pattern interferometry. The PZT is used as driving component of phase-shift system and translation component of flexure hinge is developed to realize micro displacement of non-friction and non-clearance. Closed-loop control system is designed for high-precision micro displacement, in which embedded digital control system is developed for completing control algorithm and capacitive sensor is used as feedback part for measuring micro displacement in real time. Dynamic model and control model of the nanometer-level precise phase-shift system is analyzed, and high-precision micro displacement is realized with digital PID control algorithm on this basis. It is proved with experiments that the location precision of the precise phase-shift system to step signal of displacement is less than 2nm and the location precision to continuous signal of displacement is less than 5nm, which is satisfied with the request of the electronic speckle shearography and phase-shift pattern interferometry. The stripe images of four-step phase-shift interferometry and the final phase distributed image correlated with distortion of objects are listed in this paper to prove the validity of nanometer-level precise phase-shift system.
A Power-Efficient Capacitive Read-Out Circuit With Parasitic-Cancellation for MEMS Cochlea Sensors.
Wang, Shiwei; Koickal, Thomas Jacob; Hamilton, Alister; Mastropaolo, Enrico; Cheung, Rebecca; Abel, Andrew; Smith, Leslie S; Wang, Lei
2016-02-01
This paper proposes a solution for signal read-out in the MEMS cochlea sensors that have very small sensing capacitance and do not have differential sensing structures. The key challenge in such sensors is the significant signal degradation caused by the parasitic capacitance at the MEMS-CMOS interface. Therefore, a novel capacitive read-out circuit with parasitic-cancellation mechanism is developed; the equivalent input capacitance of the circuit is negative and can be adjusted to cancel the parasitic capacitance. Chip results prove that the use of parasitic-cancellation is able to increase the sensor sensitivity by 35 dB without consuming any extra power. In general, the circuit follows a low-degradation low-amplification approach which is more power-efficient than the traditional high-degradation high-amplification approach; it employs parasitic-cancellation to reduce the signal degradation and therefore a lower gain is required in the amplification stage. Besides, the chopper-stabilization technique is employed to effectively reduce the low-frequency circuit noise and DC offsets. As a result of these design considerations, the prototype chip demonstrates the capability of converting a 7.5 fF capacitance change of a 1-Volt-biased 0.5 pF capacitive sensor pair into a 0.745 V signal-conditioned output at the cost of only 165.2 μW power consumption.
Improved circuit for measuring capacitive and inductive reactances
NASA Technical Reports Server (NTRS)
Dalins, I.; Mc Carty, V.
1967-01-01
Amplifier circuit measures very small changes of capacitive or inductive reactance, such as produced by a variable capacitance or a variable inductance displacement transducer. The circuit employs reactance-sensing oscillators in which field effect transistors serve as the active elements.
3D capacitive tactile sensor using DRIE micromachining
NASA Astrophysics Data System (ADS)
Chuang, Chiehtang; Chen, Rongshun
2005-07-01
This paper presents a three dimensional micro capacitive tactile sensor that can detect normal and shear forces which is fabricated using deep reactive ion etching (DRIE) bulk silicon micromachining. The tactile sensor consists of a force transmission plate, a symmetric suspension system, and comb electrodes. The sensing character is based on the changes of capacitance between coplanar sense electrodes. High sensitivity is achieved by using the high aspect ratio interdigital electrodes with narrow comb gaps and large overlap areas. The symmetric suspension mechanism of this sensor can easily solve the coupling problem of measurement and increase the stability of the structure. In this paper, the sensor structure is designed, the capacitance variation of the proposed device is theoretically analyzed, and the finite element analysis of mechanical behavior of the structures is performed.
Electrical Capacitance Volume Tomography: Design and Applications
Wang, Fei; Marashdeh, Qussai; Fan, Liang-Shih; Warsito, Warsito
2010-01-01
This article reports recent advances and progress in the field of electrical capacitance volume tomography (ECVT). ECVT, developed from the two-dimensional electrical capacitance tomography (ECT), is a promising non-intrusive imaging technology that can provide real-time three-dimensional images of the sensing domain. Images are reconstructed from capacitance measurements acquired by electrodes placed on the outside boundary of the testing vessel. In this article, a review of progress on capacitance sensor design and applications to multi-phase flows is presented. The sensor shape, electrode configuration, and the number of electrodes that comprise three key elements of three-dimensional capacitance sensors are illustrated. The article also highlights applications of ECVT sensors on vessels of various sizes from 1 to 60 inches with complex geometries. Case studies are used to show the capability and validity of ECVT. The studies provide qualitative and quantitative real-time three-dimensional information of the measuring domain under study. Advantages of ECVT render it a favorable tool to be utilized for industrial applications and fundamental multi-phase flow research. PMID:22294905
An RFID-based on-lens sensor system for long-term IOP monitoring.
Hsu, Shun-Hsi; Chiou, Jin-Chern; Liao, Yu-Te; Yang, Tzu-Sen; Kuei, Cheng-Kai; Wu, Tsung-Wei; Huang, Yu-Chieh
2015-01-01
In this paper, an RFID-based on-lens sensor system is proposed for noninvasive long-term intraocular pressure monitoring. The proposed sensor IC, fabricated in a 0.18um CMOS process, consists of capacitive sensor readout circuitry, RFID communication circuits, and digital processing units. The sensor IC is integrated with electroplating capacitive sensors and a receiving antenna on the contact lens. The sensor IC can be wirelessly powered, communicate with RFID compatible equipment, and perform IOP measurement using on-lens capacitive sensor continuously from a 2cm distance while the incident power from an RFID reader is 20 dBm. The proposed system is compatible to Gen2 RFID protocol, extending the flexibility and reducing the self-developed firmware efforts.
Jenke, Christoph; Pallejà Rubio, Jaume; Kibler, Sebastian; Häfner, Johannes; Richter, Martin; Kutter, Christoph
2017-01-01
With the combination of micropumps and flow sensors, highly accurate and secure closed-loop controlled micro dosing systems for liquids are possible. Implementing a single stroke based control mode with piezoelectrically driven micro diaphragm pumps can provide a solution for dosing of volumes down to nanoliters or variable average flow rates in the range of nL/min to μL/min. However, sensor technologies feature a yet undetermined accuracy for measuring highly pulsatile micropump flow. Two miniaturizable in-line sensor types providing electrical readout—differential pressure based flow sensors and thermal calorimetric flow sensors—are evaluated for their suitability of combining them with mircopumps. Single stroke based calibration of the sensors was carried out with a new method, comparing displacement volumes and sensor flow volumes. Limitations of accuracy and performance for single stroke based flow control are described. Results showed that besides particle robustness of sensors, controlling resistive and capacitive damping are key aspects for setting up reproducible and reliable liquid dosing systems. Depending on the required average flow or defined volume, dosing systems with an accuracy of better than 5% for the differential pressure based sensor and better than 6.5% for the thermal calorimeter were achieved. PMID:28368344
Bimodal wireless sensing with dual-channel wide bandgap heterostructure varactors
NASA Astrophysics Data System (ADS)
Deen, David A.; Osinsky, Andrei; Miller, Ross
2014-03-01
A capacitive wireless sensing scheme is developed that utilizes an AlN/GaN-based dual-channel varactor. The dual-channel heterostructure affords two capacitance plateaus within the capacitance-voltage (CV) characteristic, owing to the two parallel two-dimensional electron gases (2DEGs) located at respective AlN/GaN interfaces. The capacitance plateaus are leveraged for the definition of two resonant states of the sensor when implemented in an inductively-coupled resonant LRC network for wireless readout. The physics-based CV model is compared with published experimental results, which serve as a basis for the sensor embodiment. The bimodal resonant sensor is befitting for a broad application space ranging from gas, electrostatic, and piezoelectric sensors to biological and chemical detection.
Double-driven shield capacitive type proximity sensor
NASA Technical Reports Server (NTRS)
Vranish, John M. (Inventor)
1993-01-01
A capacity type proximity sensor comprised of a capacitance type sensor, a capacitance type reference, and two independent and mutually opposing driven shields respectively adjacent to the sensor and reference and which are coupled in an electrical bridge circuit configuration and driven by a single frequency crystal controlled oscillator is presented. The bridge circuit additionally includes a pair of fixed electrical impedance elements which form adjacent arms of the bridge and which comprise either a pair of precision resistances or capacitors. Detection of bridge unbalance provides an indication of the mutual proximity between an object and the sensor. Drift compensation is also utilized to improve performance and thus increase sensor range and sensitivity.
Perspectives on MEMS in bioengineering: a novel capacitive position microsensor.
Pedrocchi, A; Hoen, S; Ferrigno, G; Pedotti, A
2000-01-01
We describe a novel capacitive position sensor using micromachining to achieve high sensitivity and large range of motion. These sensors require a new theoretical framework to describe and optimize their performance. Employing a complete description of the electrical fields, the sensor should deviate from the standard geometries used for capacitive sensors. By this optimization, the sensor gains a twofold increase in sensitivity. Results on a PC board 10x model imply that the micromachined sensor should achieve a sensitivity of less than 10 nm over 500-micron range of travel. Some bioengineering applications are addressed, including positioning of micromirrors for laser surgery and dose control for implantable drug delivery systems.
Integrated control and health management. Orbit transfer rocket engine technology program
NASA Technical Reports Server (NTRS)
Holzmann, Wilfried A.; Hayden, Warren R.
1988-01-01
To insure controllability of the baseline design for a 7500 pound thrust, 10:1 throttleable, dual expanded cycle, Hydrogen-Oxygen, orbit transfer rocket engine, an Integrated Controls and Health Monitoring concept was developed. This included: (1) Dynamic engine simulations using a TUTSIM derived computer code; (2) analysis of various control methods; (3) Failure Modes Analysis to identify critical sensors; (4) Survey of applicable sensors technology; and, (5) Study of Health Monitoring philosophies. The engine design was found to be controllable over the full throttling range by using 13 valves, including an oxygen turbine bypass valve to control mixture ratio, and a hydrogen turbine bypass valve, used in conjunction with the oxygen bypass to control thrust. Classic feedback control methods are proposed along with specific requirements for valves, sensors, and the controller. Expanding on the control system, a Health Monitoring system is proposed including suggested computing methods and the following recommended sensors: (1) Fiber optic and silicon bearing deflectometers; (2) Capacitive shaft displacement sensors; and (3) Hot spot thermocouple arrays. Further work is needed to refine and verify the dynamic simulations and control algorithms, to advance sensor capabilities, and to develop the Health Monitoring computational methods.
He, Zhongfu; Chen, Wenjun; Liang, Binghao; Liu, Changyong; Yang, Leilei; Lu, Dongwei; Mo, Zichao; Zhu, Hai; Tang, Zikang; Gui, Xuchun
2018-04-18
Flexible pressure sensors are of great importance to be applied in artificial intelligence and wearable electronics. However, assembling a simple structure, high-performance capacitive pressure sensor, especially for monitoring the flow of liquids, is still a big challenge. Here, on the basis of a sandwich-like structure, we propose a facile capacitive pressure sensor optimized by a flexible, low-cost nylon netting, showing many merits including a high response sensitivity (0.33 kPa -1 ) in a low-pressure regime (<1 kPa), an ultralow detection limit as 3.3 Pa, excellent working stability after more than 1000 cycles, and synchronous monitoring for human pulses and clicks. More important, this sensor exhibits an ultrafast response speed (<20 ms), which enables its detection for the fast variations of a small applied pressure from the morphological changing processes of a droplet falling onto the sensor. Furthermore, a capacitive pressure sensor array is fabricated for demonstrating the ability to spatial pressure distribution. Our developed pressure sensors show great prospects in practical applications such as health monitoring, flexible tactile devices, and motion detection.
3-Axis Fully-Integrated Capacitive Tactile Sensor with Flip-Bonded CMOS on LTCC Interposer.
Asano, Sho; Muroyama, Masanori; Nakayama, Takahiro; Hata, Yoshiyuki; Nonomura, Yutaka; Tanaka, Shuji
2017-10-25
This paper reports a 3-axis fully integrated differential capacitive tactile sensor surface-mountable on a bus line. The sensor integrates a flip-bonded complementary metal-oxide semiconductor (CMOS) with capacitive sensing circuits on a low temperature cofired ceramic (LTCC) interposer with Au through vias by Au-Au thermo-compression bonding. The CMOS circuit and bonding pads on the sensor backside were electrically connected through Au bumps and the LTCC interposer, and the differential capacitive gap was formed by an Au sealing frame. A diaphragm for sensing 3-axis force was formed in the CMOS substrate. The dimensions of the completed sensor are 2.5 mm in width, 2.5 mm in length, and 0.66 mm in thickness. The fabricated sensor output coded 3-axis capacitive sensing data according to applied 3-axis force by three-dimensional (3D)-printed pins. The measured sensitivity was as high as over 34 Count/mN for normal force and 14 to 15 Count/mN for shear force with small noise, which corresponds to less than 1 mN. The hysteresis and the average cross-sensitivity were also found to be less than 2% full scale and 11%, respectively.
3-Axis Fully-Integrated Capacitive Tactile Sensor with Flip-Bonded CMOS on LTCC Interposer †
Asano, Sho; Nakayama, Takahiro; Hata, Yoshiyuki; Tanaka, Shuji
2017-01-01
This paper reports a 3-axis fully integrated differential capacitive tactile sensor surface-mountable on a bus line. The sensor integrates a flip-bonded complementary metal-oxide semiconductor (CMOS) with capacitive sensing circuits on a low temperature cofired ceramic (LTCC) interposer with Au through vias by Au-Au thermo-compression bonding. The CMOS circuit and bonding pads on the sensor backside were electrically connected through Au bumps and the LTCC interposer, and the differential capacitive gap was formed by an Au sealing frame. A diaphragm for sensing 3-axis force was formed in the CMOS substrate. The dimensions of the completed sensor are 2.5 mm in width, 2.5 mm in length, and 0.66 mm in thickness. The fabricated sensor output coded 3-axis capacitive sensing data according to applied 3-axis force by three-dimensional (3D)-printed pins. The measured sensitivity was as high as over 34 Count/mN for normal force and 14 to 15 Count/mN for shear force with small noise, which corresponds to less than 1 mN. The hysteresis and the average cross-sensitivity were also found to be less than 2% full scale and 11%, respectively. PMID:29068429
Jo, Namgyeong; Kim, Bongjun; Lee, Sun-Mi; Oh, Jeseung; Park, In Ho; Jin Lim, Kook; Shin, Jeon-Soo; Yoo, Kyung-Hwa
2018-04-15
To prevent spread of infection and antibiotic resistance, fast and accurate diagnosis of bacterial infection and subsequent administration of antimicrobial agents are important. However, conventional methods for bacterial detection and antibiotic susceptibility testing (AST) require more than two days, leading to delays that have contributed to an increase in antibiotic-resistant bacteria. Here, we report an aptamer-functionalized capacitance sensor array that can monitor bacterial growth and antibiotic susceptibility in real-time. While E. coli and S. aureus were cultured, the capacitance increased over time, and apparent bacterial growth curves were observed even when 10 CFU/mL bacteria was inoculated. Furthermore, because of the selectivity of aptamers, bacteria could be identified within 1h using the capacitance sensor array functionalized with aptamers. In addition to bacterial growth, antibiotic susceptibility could be monitored in real-time. When bacteria were treated with antibiotics above the minimum inhibitory concentration (MIC), the capacitance decreased because the bacterial growth was inhibited. These results demonstrate that the aptamer-functionalized capacitance sensor array might be applied for rapid ASTs. Copyright © 2017 Elsevier B.V. All rights reserved.
Cell-based capacitance sensor for analysis of EGFR expression on cell membrane
NASA Astrophysics Data System (ADS)
Shin, Dong-Myeong; Shin, Yong-Cheol; Ha, Ji Hye; Lee, Jong-Ho; Han, Dong-Wook; Kim, Jong-Man; Kim, Hyung Kook; Hwang, Yoon-Hwae
2013-02-01
Cancer cells have many kinds of cancer biomarkers. Among them, the epidermal growth factor (EGF) receptors can show a possibility for a cancer marker because the over-expression of EGF receptor is related with fibrous, colorectal, cervical and gastric tumorigenesis. We fabricated the capacitance sensor with a gap area of 50 μm × 200 μm by using photolithography and lift-off method. Using the capacitance sensor, we investigated the time dependent capacitance changes of different kinds of fibrous cells, such as HT1080 fibrosarcoma, L-929 fibroblast cell line and nHDF dermal fibroblast primary cell. We found that when we put the EGF, the capacitance decreased due to the immobilization of EGF to EGF receptor on the cell membrane. The quantitative determination of EGF receptor level for various fibrous cells was carried out and the results showed good correlation with conventional method. Based on our results, we suggest that the capacitance sensor can measure the expression level of the EGF receptor on cell membrane and be a good candidate as a cancer diagnosis.
A Wearable Capacitive Sensor for Monitoring Human Respiratory Rate
NASA Astrophysics Data System (ADS)
Kundu, Subrata Kumar; Kumagai, Shinya; Sasaki, Minoru
2013-04-01
Realizing an untethered, low-cost, and comfortably wearable respiratory rate sensor for long-term breathing monitoring application still remains a challenge. In this paper, a conductive-textile-based wearable respiratory rate sensing technique based on the capacitive sensing approach is proposed. The sensing unit consists of two conductive textile electrodes that can be easily fabricated, laminated, and integrated in garments. Respiration cycle is detected by measuring the capacitance of two electrodes placed on the inner anterior and posterior sides of a T-shirt at either the abdomen or chest position. A convenient wearable respiratory sensor setup with a capacitance-to-voltage converter has been devised. Respiratory rate as well as breathing mode can be accurately identified using the designed sensor. The sensor output provides significant information on respiratory flow. The effectiveness of the proposed system for different breathing patterns has been evaluated by experiments.
Shao, Chenzhong; Tanaka, Shuji; Nakayama, Takahiro; Hata, Yoshiyuki; Bartley, Travis; Muroyama, Masanori
2017-01-01
Robot tactile sensation can enhance human–robot communication in terms of safety, reliability and accuracy. The final goal of our project is to widely cover a robot body with a large number of tactile sensors, which has significant advantages such as accurate object recognition, high sensitivity and high redundancy. In this study, we developed a multi-sensor system with dedicated Complementary Metal-Oxide-Semiconductor (CMOS) Large-Scale Integration (LSI) circuit chips (referred to as “sensor platform LSI”) as a framework of a serial bus-based tactile sensor network system. The sensor platform LSI supports three types of sensors: an on-chip temperature sensor, off-chip capacitive and resistive tactile sensors, and communicates with a relay node via a bus line. The multi-sensor system was first constructed on a printed circuit board to evaluate basic functions of the sensor platform LSI, such as capacitance-to-digital and resistance-to-digital conversion. Then, two kinds of external sensors, nine sensors in total, were connected to two sensor platform LSIs, and temperature, capacitive and resistive sensing data were acquired simultaneously. Moreover, we fabricated flexible printed circuit cables to demonstrate the multi-sensor system with 15 sensor platform LSIs operating simultaneously, which showed a more realistic implementation in robots. In conclusion, the multi-sensor system with up to 15 sensor platform LSIs on a bus line supporting temperature, capacitive and resistive sensing was successfully demonstrated. PMID:29061954
Shao, Chenzhong; Tanaka, Shuji; Nakayama, Takahiro; Hata, Yoshiyuki; Bartley, Travis; Nonomura, Yutaka; Muroyama, Masanori
2017-08-28
Robot tactile sensation can enhance human-robot communication in terms of safety, reliability and accuracy. The final goal of our project is to widely cover a robot body with a large number of tactile sensors, which has significant advantages such as accurate object recognition, high sensitivity and high redundancy. In this study, we developed a multi-sensor system with dedicated Complementary Metal-Oxide-Semiconductor (CMOS) Large-Scale Integration (LSI) circuit chips (referred to as "sensor platform LSI") as a framework of a serial bus-based tactile sensor network system. The sensor platform LSI supports three types of sensors: an on-chip temperature sensor, off-chip capacitive and resistive tactile sensors, and communicates with a relay node via a bus line. The multi-sensor system was first constructed on a printed circuit board to evaluate basic functions of the sensor platform LSI, such as capacitance-to-digital and resistance-to-digital conversion. Then, two kinds of external sensors, nine sensors in total, were connected to two sensor platform LSIs, and temperature, capacitive and resistive sensing data were acquired simultaneously. Moreover, we fabricated flexible printed circuit cables to demonstrate the multi-sensor system with 15 sensor platform LSIs operating simultaneously, which showed a more realistic implementation in robots. In conclusion, the multi-sensor system with up to 15 sensor platform LSIs on a bus line supporting temperature, capacitive and resistive sensing was successfully demonstrated.
Ma, Chao; Huang, Zhonghua; Wang, Zhiqi; Zhou, Linxuan; Li, Yinlin
2017-01-01
Capacitive coupling intra-body communication (CC-IBC) has become one of the candidates for healthcare sensor networks due to its positive prevailing features of energy efficiency, transmission rate and security. Under the CC-IBC scheme, some of the electric field emitted from signal (SIG) electrode of the transmitter will couple directly to the ground (GND) electrode, acting equivalently as an internal impedance of the signal source and inducing considerable energy losses. However, none of the previous works have fully studied the problem. In this paper, the underlying theory of such energy loss is investigated and quantitatively evaluated using conventional parameters. Accordingly, a method of electric active shielding is proposed to reduce the displacement current across the SIG-GND electrodes, leading to less power loss. In addition, the variation of such loss in regard to frequency range and positions on human body was also considered. The theory was validated by finite element method simulation and experimental measurement. The prototype result shows that the receiving power has been improved by approximate 5.5 dBm while the total power consumption is maximally 9 mW less using the proposed technique, providing an energy efficient option in physical layer for wearable and implantable healthcare sensor networks. PMID:28885546
Neural Network Compensation for Frequency Cross-Talk in Laser Interferometry
NASA Astrophysics Data System (ADS)
Lee, Wooram; Heo, Gunhaeng; You, Kwanho
The heterodyne laser interferometer acts as an ultra-precise measurement apparatus in semiconductor manufacture. However the periodical nonlinearity property caused from frequency cross-talk is an obstacle to improve the high measurement accuracy in nanometer scale. In order to minimize the nonlinearity error of the heterodyne interferometer, we propose a frequency cross-talk compensation algorithm using an artificial intelligence method. The feedforward neural network trained by back-propagation compensates the nonlinearity error and regulates to minimize the difference with the reference signal. With some experimental results, the improved accuracy is proved through comparison with the position value from a capacitive displacement sensor.
Multi-interface Level Sensors and New Development in Monitoring and Control of Oil Separators
Bukhari, Syed Faisal Ahmed; Yang, Wuqiang
2006-01-01
In the oil industry, huge saving may be made if suitable multi-interface level measurement systems are employed for effectively monitoring crude oil separators and efficient control of their operation. A number of techniques, e.g. externally mounted displacers, differential pressure transmitters and capacitance rod devices, have been developed to measure the separation process with gas, oil, water and other components. Because of the unavailability of suitable multi-interface level measurement systems, oil separators are currently operated by the trial-and-error approach. In this paper some conventional techniques, which have been used for level measurement in industry, and new development are discussed.
A High-Precision Instrument for Mapping of Rotational Errors in Rotary Stages
Xu, W.; Lauer, K.; Chu, Y.; ...
2014-11-02
A rotational stage is a key component of every X-ray instrument capable of providing tomographic or diffraction measurements. To perform accurate three-dimensional reconstructions, runout errors due to imperfect rotation (e.g. circle of confusion) must be quantified and corrected. A dedicated instrument capable of full characterization and circle of confusion mapping in rotary stages down to the sub-10 nm level has been developed. A high-stability design, with an array of five capacitive sensors, allows simultaneous measurements of wobble, radial and axial displacements. The developed instrument has been used for characterization of two mechanical stages which are part of an X-ray microscope.
Evaluation of excitation strategy with multi-plane electrical capacitance tomography sensor
NASA Astrophysics Data System (ADS)
Mao, Mingxu; Ye, Jiamin; Wang, Haigang; Zhang, Jiaolong; Yang, Wuqiang
2016-11-01
Electrical capacitance tomography (ECT) is an imaging technique for measuring the permittivity change of materials. Using a multi-plane ECT sensor, three-dimensional (3D) distribution of permittivity may be represented. In this paper, three excitation strategies, including single-electrode excitation, dual-electrode excitation in the same plane, and dual-electrode excitation in different planes are investigated by numerical simulation and experiment for two three-plane ECT sensors with 12 electrodes in total. In one sensor, the electrodes on the middle plane are in line with the others. In the other sensor, they are rotated 45° with reference to the other two planes. A linear back projection algorithm is used to reconstruct the images and a correlation coefficient is used to evaluate the image quality. The capacitance data and sensitivity distribution with each measurement strategy and sensor model are analyzed. Based on simulation and experimental results using noise-free and noisy capacitance data, the performance of the three strategies is evaluated.
Jeong, Y J; Oh, T I; Woo, E J; Kim, K J
2017-07-01
Recently, highly flexible and soft pressure distribution imaging sensor is in great demand for tactile sensing, gait analysis, ubiquitous life-care based on activity recognition, and therapeutics. In this study, we integrate the piezo-capacitive and piezo-electric nanowebs with the conductive fabric sheets for detecting static and dynamic pressure distributions on a large sensing area. Electrical impedance tomography (EIT) and electric source imaging are applied for reconstructing pressure distribution images from measured current-voltage data on the boundary of the hybrid fabric sensor. We evaluated the piezo-capacitive nanoweb sensor, piezo-electric nanoweb sensor, and hybrid fabric sensor. The results show the feasibility of static and dynamic pressure distribution imaging from the boundary measurements of the fabric sensors.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Liu, Maolong; Ryals, Matthew; Ali, Amir
2016-08-01
A variety of instruments are being developed and qualified to support the Accident Tolerant Fuels (ATF) program and future transient irradiations at the Transient Reactor Test (TREAT) facility at Idaho National Laboratory (INL). The University of New Mexico (UNM) is working with INL to develop capacitance-based void sensors for determining the timing of critical boiling phenomena in static capsule fuel testing and the volume-averaged void fraction in flow-boiling in-pile water loop fuel testing. The static capsule sensor developed at INL is a plate-type configuration, while UNM is utilizing a ring-type capacitance sensor. Each sensor design has been theoretically and experimentallymore » investigated at INL and UNM. Experiments are being performed at INL in an autoclave to investigate the performance of these sensors under representative Pressurized Water Reactor (PWR) conditions in a static capsule. Experiments have been performed at UNM using air-water two-phase flow to determine the sensitivity and time response of the capacitance sensor under a flow boiling configuration. Initial measurements from the capacitance sensor have demonstrated the validity of the concept to enable real-time measurement of void fraction. The next steps include designing the cabling interface with the flow loop at UNM for Reactivity Initiated Accident (RIA) ATF testing at TREAT and further characterization of the measurement response for each sensor under varying conditions by experiments and modeling.« less
Structure and Fabrication of a Microscale Flow-Rate/Skin Friction Sensor
NASA Technical Reports Server (NTRS)
Chandrasekharan, Vijay (Inventor); Sells, Jeremy (Inventor); Sheplak, Mark (Inventor); Arnold, David P. (Inventor)
2014-01-01
A floating element shear sensor and method for fabricating the same are provided. According to an embodiment, a microelectromechanical systems (MEMS)-based capacitive floating element shear stress sensor is provided that can achieve time-resolved turbulence measurement. In one embodiment, a differential capacitive transduction scheme is used for shear stress measurement. The floating element structure for the differential capacitive transduction scheme incorporates inter digitated comb fingers forming differential capacitors, which provide electrical output proportional to the floating element deflection.
Wang, Decai; Li, Ping; Wen, Yumei
2016-10-01
In this paper, the design and modeling of a magnetically driven electric-field sensor for non-contact DC voltage measurement are presented. The magnetic drive structure of the sensor is composed of a small solenoid and a cantilever beam with a cylindrical magnet mounted on it. The interaction of the magnet and the solenoid provides the magnetic driving force for the sensor. Employing magnetic drive structure brings the benefits of low driving voltage and large vibrating displacement, which consequently results in less interference from the drive signal. In the theoretical analyses, the capacitance calculation model between the wire and the sensing electrode is built. The expression of the magnetic driving force is derived by the method of linear fitting. The dynamical model of the magnetic-driven cantilever beam actuator is built by using Euler-Bernoulli theory and distributed parameter method. Taking advantage of the theoretical model, the output voltage of proposed sensor can be predicted. The experimental results are in good agreement with the theoretical results. The proposed sensor shows a favorable linear response characteristic. The proposed sensor has a measuring sensitivity of 9.87 μV/(V/m) at an excitation current of 37.5 mA. The electric field intensity resolution can reach 10.13 V/m.
Capacitance Based Moisture Sensing for Microgravity Plant Modules: Sensor Design and Considerations
NASA Technical Reports Server (NTRS)
Schaber, Chad L.; Nurge, Mark; Monje, Oscar
2011-01-01
Life support systems for growing plants in microgravity should strive for providing optimal growing conditions and increased automation. Accurately tracking soil moisture content can forward both of these aims, so an attempt was made to instrument a microgravity growth module currently in development, the VEGGIE rooting pillow, in order to monitor moisture levels. Two electrode systems for a capacitance-based moisture sensor were tested. Trials with both types of electrodes showed a linear correlation between observed capacitance and water content over certain ranges of moisture within the pillows. Overall, both types of the electrodes and the capacitance-based moisture sensor are promising candidates for tracking water levels for microgravity plant growth systems.
Capacitively-coupled inductive sensor
Ekdahl, Carl A.
1984-01-01
A capacitively coupled inductive shunt current sensor which utilizes capacitive coupling between flanges having an annular inductive channel formed therein. A voltage dividing capacitor is connected between the coupling capacitor and ground to provide immediate capacitive division of the output signal so as to provide a high frequency response of the current pulse to be detected. The present invention can be used in any desired outer conductor such as the outer conductor of a coaxial transmission line, the outer conductor of an electron beam transmission line, etc.
Carbon Nanotube Tape Vibrating Gyroscope
NASA Technical Reports Server (NTRS)
Tucker, Dennis Stephen (Inventor)
2016-01-01
A vibrating gyroscope includes a piezoelectric strip having length and width dimensions. The piezoelectric strip includes a piezoelectric material and carbon nanotubes (CNTs) substantially aligned and polled along the strip's length dimension. A spindle having an axis of rotation is coupled to the piezoelectric strip. The axis of rotation is parallel to the strip's width dimension. A first capacitance sensor is mechanically coupled to the spindle for rotation therewith. The first capacitance sensor is positioned at one of the strip's opposing ends and is spaced apart from one of the strip's opposing faces. A second capacitance sensor is mechanically coupled to the spindle for rotation therewith. The second capacitance sensor is positioned at another of the strip's opposing ends and is spaced apart from another of the strip's opposing faces. A voltage source applies an AC voltage to the piezoelectric strip.
NASA Astrophysics Data System (ADS)
Ikhsanti, Mila Izzatul; Bouzida, Rana; Wijaya, Sastra Kusuma; Rohmadi, Muttakin, Imamul; Taruno, Warsito P.
2017-02-01
This research aims to explore the feasibility of capacitance-digital converter and impedance converter for measurement module in electrical capacitance tomography (ECT) system. ECT sensor used was a cylindrical sensor having 8 electrodes. Absolute capacitance measurement system based on Sigma Delta Capacitance-to-Digital-Converter AD7746 has been shown to produce measurement with high resolution. Whereas, capacitance measurement with wide range of frequency is possible using Impedance Converter AD5933. Comparison of measurement accuracy by both AD7746 and AD5933 with reference of LCR meter was evaluated. Biological matters represented in water and oil were treated as object reconstructed into image using linear back projection (LBP) algorithm.
From land to water: bringing dielectric elastomer sensing to the underwater realm
NASA Astrophysics Data System (ADS)
Walker, Christopher; Anderson, Iain
2016-04-01
Since the late 1990's dielectric elastomers (DEs) have been investigated for their use as sensors. To date, there have been some impressive developments: finger displacement controls for video games and integration with medical rehabilitation devices to aid patient recovery. It is clear DE sensing is well established for dry applications, the next frontier, however, is to adapt this technology for the other 71% of the Earth's surface. With proven and perhaps improved water resistance, many new applications could be developed in areas such as diver communication and control of underwater robotics; even wearable devices on land must withstand sweat, washing, and the rain. This study investigated the influence of fresh and salt water on DE sensing. In particular, sensors have been manufactured with waterproof connections and submersed in fresh and salt water baths. Temperature and resting capacitance were recorded. Issues with the basic DE sensor have been identified and compensated for with modifications to the sensor. The electrostatic field, prior and post modification, has been modeled with ANSYS Maxwell. The aim of this investigation was to identify issues, perform modifications and propose a new sensor design suited to wet and underwater applications.
3D printed stretchable capacitive sensors for highly sensitive tactile and electrochemical sensing
NASA Astrophysics Data System (ADS)
Li, Kai; Wei, Hong; Liu, Wenguang; Meng, Hong; Zhang, Peixin; Yan, Chaoyi
2018-05-01
Developments of innovative strategies for the fabrication of stretchable sensors are of crucial importance for their applications in wearable electronic systems. In this work, we report the successful fabrication of stretchable capacitive sensors using a novel 3D printing method for highly sensitive tactile and electrochemical sensing applications. Unlike conventional lithographic or templated methods, the programmable 3D printing technique can fabricate complex device structures in a cost-effective and facile manner. We designed and fabricated stretchable capacitive sensors with interdigital and double-vortex designs and demonstrated their successful applications as tactile and electrochemical sensors. Especially, our stretchable sensors exhibited a detection limit as low as 1 × 10-6 M for NaCl aqueous solution, which could have significant potential applications when integrated in electronics skins.
3D printed stretchable capacitive sensors for highly sensitive tactile and electrochemical sensing.
Li, Kai; Wei, Hong; Liu, Wenguang; Meng, Hong; Zhang, Peixin; Yan, Chaoyi
2018-05-04
Developments of innovative strategies for the fabrication of stretchable sensors are of crucial importance for their applications in wearable electronic systems. In this work, we report the successful fabrication of stretchable capacitive sensors using a novel 3D printing method for highly sensitive tactile and electrochemical sensing applications. Unlike conventional lithographic or templated methods, the programmable 3D printing technique can fabricate complex device structures in a cost-effective and facile manner. We designed and fabricated stretchable capacitive sensors with interdigital and double-vortex designs and demonstrated their successful applications as tactile and electrochemical sensors. Especially, our stretchable sensors exhibited a detection limit as low as 1 × 10 -6 M for NaCl aqueous solution, which could have significant potential applications when integrated in electronics skins.
NASA Astrophysics Data System (ADS)
Klanjšek Gunde, Marta; Hauptman, Nina; Maček, Marijan; Kunaver, Matjaž
2009-06-01
SU8, the near-UV photosensitive epoxy-based polymer was used as a sensor layer in the capacitive chemical sensor, ready for integration with a generic double-metal CMOS technology. It was observed that the response of the sensor slowly increases with the temperature applied in hard-baking process as long as it remains below 300°C. At this temperature the response of the sensor abruptly increases and becomes almost threefold. It was shown that fully crosslinked structure of the sensor layer becomes opened and disordered when the sensor is hard-baked at temperatures between 300°C and 320°C, that is, still well below the degradation temperature of the polymer. These changes in chemical structure were analyzed by Fourier-transform infrared spectroscopy. The temperature-dependent changes of the sensor layer structure enable one to prepare a combination of capacitive chemical sensors with good discrimination between some volatile organic compounds.
Design of interdigital spiral and concentric capacitive sensors for materials evaluation
NASA Astrophysics Data System (ADS)
Chen, Tianming; Bowler, Nicola
2013-01-01
This paper describes the design of two circular coplanar interdigital sensors with i) a spiral interdigital configuration and ii) a concentric interdigital configuration for the nondestructive evaluation of multilayered dielectric structures. A numerical model accounting for sensor geometry, test-piece geometry and real permittivity, and metal electrode thickness has been developed to calculate the capacitance of the sensors when in contact with a planar test-piece comprising up to four layers. Compared with a disk-and-ring coplanar capacitive sensor developed previously, the interdigital configurations are predicted to have higher signal-to-noise ratio and better accuracy in materials characterization. The disk-and-ring configuration, on the other hand, possesses advantages such as deeper penetration depth and better immunity to lift-off variations.
Characterisation of capacitively coupled HV/HR-CMOS sensor chips for the CLIC vertex detector
NASA Astrophysics Data System (ADS)
Kremastiotis, I.
2017-12-01
The capacitive coupling between an active sensor and a readout ASIC has been considered in the framework of the CLIC vertex detector study. The CLICpix Capacitively Coupled Pixel Detector (C3PD) is a High-Voltage CMOS sensor chip produced in a commercial 180 nm HV-CMOS process for this purpose. The sensor was designed to be connected to the CLICpix2 readout chip. It therefore matches the dimensions of the readout chip, featuring a matrix of 128×128 square pixels with 25μm pitch. The sensor chip has been produced with the standard value for the substrate resistivity (~20 Ωcm) and it has been characterised in standalone testing mode, before receiving and testing capacitively coupled assemblies. The standalone measurement results show a rise time of ~20 ns for a power consumption of 5μW/pixel. Production of the C3PD HV-CMOS sensor chip with higher substrate resistivity wafers (~20, 80, 200 and 1000 Ωcm) is foreseen. The expected benefits of the higher substrate resistivity will be studied using future assemblies with the readout chip.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Ekdahl, C.A.
In experiments involving pulsed high magnetic fields the appearance of the full induced voltage at the output terminals of large-area inductive sensors such as diamagnetic loops and Rogowski belts imposes severe requirements on the insulation near the output. Capacitive detection of the inductive-sensor output voltage provides an ideal geometry for high-voltage insulation, and also accomplishes the necessary voltage division. An inductive-shunt current monitor was designed to utilize the capacitive-detection principle. The contruction of this device and its performance are described in this paper.
Tripathy, Ashis; Pramanik, Sumit; Manna, Ayan; Bhuyan, Satyanarayan; Azrin Shah, Nabila Farhana; Radzi, Zamri; Abu Osman, Noor Azuan
2016-01-01
Despite the many attractive potential uses of ceramic materials as humidity sensors, some unavoidable drawbacks, including toxicity, poor biocompatibility, long response and recovery times, low sensitivity and high hysteresis have stymied the use of these materials in advanced applications. Therefore, in present investigation, we developed a capacitive humidity sensor using lead-free Ca,Mg,Fe,Ti-Oxide (CMFTO)-based electro-ceramics with perovskite structures synthesized by solid-state step-sintering. This technique helps maintain the submicron size porous morphology of the developed lead-free CMFTO electro-ceramics while providing enhanced water physisorption behaviour. In comparison with conventional capacitive humidity sensors, the presented CMFTO-based humidity sensor shows a high sensitivity of up to 3000% compared to other materials, even at lower signal frequency. The best also shows a rapid response (14.5 s) and recovery (34.27 s), and very low hysteresis (3.2%) in a 33%–95% relative humidity range which are much lower values than those of existing conventional sensors. Therefore, CMFTO nano-electro-ceramics appear to be very promising materials for fabricating high-performance capacitive humidity sensors. PMID:27455263
Dong, Tao; Barbosa, Cátia
2015-01-01
Microfluidic two-phase flow detection has attracted plenty of interest in various areas of biology, medicine and chemistry. This work presents a capacitive sensor using insulated interdigital electrodes (IDEs) to detect the presence of droplets in a microchannel. This droplet sensor is composed of a glass substrate, patterned gold electrodes and an insulation layer. A polydimethylsiloxane (PDMS) cover bonded to the multilayered structure forms a microchannel. Capacitance variation induced by the droplet passage was thoroughly investigated with both simulation and experimental work. Olive oil and deionized water were employed as the working fluids in the experiments to demonstrate the droplet sensor. The results show a good sensitivity of the droplet with the appropriate measurement connection. This capacitive droplet sensor is promising to be integrated into a lab-on-chip device for in situ monitoring/counting of droplets or bubbles. PMID:25629705
Multi-Channel Capacitive Sensor Arrays
Wang, Bingnan; Long, Jiang; Teo, Koon Hoo
2016-01-01
In this paper, multi-channel capacitive sensor arrays based on microstrip band-stop filters are studied. The sensor arrays can be used to detect the proximity of objects at different positions and directions. Each capacitive sensing structure in the array is connected to an inductive element to form resonance at different frequencies. The resonances are designed to be isolated in the frequency spectrum, such that the change in one channel does not affect resonances at other channels. The inductive element associated with each capacitive sensor can be surface-mounted inductors, integrated microstrip inductors or metamaterial-inspired structures. We show that by using metamaterial split-ring structures coupled to a microstrip line, the quality factor of each resonance can be greatly improved compared to conventional surface-mounted or microstrip meander inductors. With such a microstrip-coupled split-ring design, more sensing elements can be integrated in the same frequency spectrum, and the sensitivity can be greatly improved. PMID:26821023
Capacitance probe for detection of anomalies in non-metallic plastic pipe
Mathur, Mahendra P.; Spenik, James L.; Condon, Christopher M.; Anderson, Rodney; Driscoll, Daniel J.; Fincham, Jr., William L.; Monazam, Esmail R.
2010-11-23
The disclosure relates to analysis of materials using a capacitive sensor to detect anomalies through comparison of measured capacitances. The capacitive sensor is used in conjunction with a capacitance measurement device, a location device, and a processor in order to generate a capacitance versus location output which may be inspected for the detection and localization of anomalies within the material under test. The components may be carried as payload on an inspection vehicle which may traverse through a pipe interior, allowing evaluation of nonmetallic or plastic pipes when the piping exterior is not accessible. In an embodiment, supporting components are solid-state devices powered by a low voltage on-board power supply, providing for use in environments where voltage levels may be restricted.
Design and Application of a Collocated Capacitance Sensor for Magnetic Bearing Spindle
NASA Technical Reports Server (NTRS)
Shin, Dongwon; Liu, Seon-Jung; Kim, Jongwon
1996-01-01
This paper presents a collocated capacitance sensor for magnetic bearings. The main feature of the sensor is that it is made of a specific compact printed circuit board (PCB). The signal processing unit has been also developed. The results of the experimental performance evaluation on the sensitivity, resolution and frequency response of the sensor are presented. Finally, an application example of the sensor to the active control of a magnetic bearing is described.
LLNL/Lion Precision LVDT amplifier
DOE Office of Scientific and Technical Information (OSTI.GOV)
Hopkins, D.J.
1994-04-01
A high-precision, low-noise, LVDT amplifier has been developed which is a significant advancement on the current state of the art in contact displacement measurement. This amplifier offers the dynamic range of a typical LVDT probe but with a resolution that rivals that of non contact displacement measuring systems such as capacitance gauges and laser interferometers. Resolution of 0.1 {mu} in with 100 Hz bandwidth is possible. This level of resolution is over an order of magnitude greater than what is now commercially available. A front panel switch can reduce the bandwidth to 2.5 Hz and attain a resolution of 0.025more » {mu} in. This level of resolution meets or exceeds that of displacement measuring laser interferometry or capacitance gauge systems. Contact displacement measurement offers high part spatial resolution and therefore can measure not only part contour but surface finish. Capacitance gauges and displacement laser interferometry offer poor part spatial resolution and can not provide good surface finish measurements. Machine tool builders, meteorologists and quality inspection departments can immediately utilize the higher accuracy and capabilities that this amplifier offers. The precision manufacturing industry can improve as a result of improved capability to measure parts that help reduce costs and minimize material waste.« less
Detailed studies of full-size ATLAS12 sensors
NASA Astrophysics Data System (ADS)
Hommels, L. B. A.; Allport, P. P.; Baca, M.; Broughton, J.; Chisholm, A.; Nikolopoulos, K.; Pyatt, S.; Thomas, J. P.; Wilson, J. A.; Kierstead, J.; Kuczewski, P.; Lynn, D.; Arratia, M.; Klein, C. T.; Ullan, M.; Fleta, C.; Fernandez-Tejero, J.; Bloch, I.; Gregor, I. M.; Lohwasser, K.; Poley, L.; Tackmann, K.; Trofimov, A.; Yildirim, E.; Hauser, M.; Jakobs, K.; Kuehn, S.; Mahboubi, K.; Mori, R.; Parzefall, U.; Clark, A.; Ferrere, D.; Gonzalez Sevilla, S.; Ashby, J.; Blue, A.; Bates, R.; Buttar, C.; Doherty, F.; McMullen, T.; McEwan, F.; O`Shea, V.; Kamada, S.; Yamamura, K.; Ikegami, Y.; Nakamura, K.; Takubo, Y.; Unno, Y.; Takashima, R.; Chilingarov, A.; Fox, H.; Affolder, A. A.; Casse, G.; Dervan, P.; Forshaw, D.; Greenall, A.; Wonsak, S.; Wormald, M.; Cindro, V.; Kramberger, G.; Mandić, I.; Mikuž, M.; Gorelov, I.; Hoeferkamp, M.; Palni, P.; Seidel, S.; Taylor, A.; Toms, K.; Wang, R.; Hessey, N. P.; Valencic, N.; Hanagaki, K.; Dolezal, Z.; Kodys, P.; Bohm, J.; Stastny, J.; Mikestikova, M.; Bevan, A.; Beck, G.; Milke, C.; Domingo, M.; Fadeyev, V.; Galloway, Z.; Hibbard-Lubow, D.; Liang, Z.; Sadrozinski, H. F.-W.; Seiden, A.; To, K.; French, R.; Hodgson, P.; Marin-Reyes, H.; Parker, K.; Jinnouchi, O.; Hara, K.; Sato, K.; Sato, K.; Hagihara, M.; Iwabuchi, S.; Bernabeu, J.; Civera, J. V.; Garcia, C.; Lacasta, C.; Marti i Garcia, S.; Rodriguez, D.; Santoyo, D.; Solaz, C.; Soldevila, U.
2016-09-01
The "ATLAS ITk Strip Sensor Collaboration" R&D group has developed a second iteration of single-sided n+-in-p type micro-strip sensors for use in the tracker upgrade of the ATLAS experiment at the High-Luminosity (HL) LHC. The full size sensors measure approximately 97 × 97mm2 and are designed for tolerance against the 1.1 ×1015neq /cm2 fluence expected at the HL-LHC. Each sensor has 4 columns of 1280 individual 23.9 mm long channels, arranged at 74.5 μm pitch. Four batches comprising 120 sensors produced by Hamamatsu Photonics were evaluated for their mechanical, and electrical bulk and strip characteristics. Optical microscopy measurements were performed to obtain the sensor surface profile. Leakage current and bulk capacitance properties were measured for each individual sensor. For sample strips across the sensor batches, the inter-strip capacitance and resistance as well as properties of the punch-through protection structure were measured. A multi-channel probecard was used to measure leakage current, coupling capacitance and bias resistance for each individual channel of 100 sensors in three batches. The compiled results for 120 unirradiated sensors are presented in this paper, including summary results for almost 500,000 strips probed. Results on the reverse bias voltage dependence of various parameters and frequency dependence of tested capacitances are included for validation of the experimental methods used. Comparing results with specified values, almost all sensors fall well within specification.
A microfabricated fringing field capacitive pH sensor with an integrated readout circuit
NASA Astrophysics Data System (ADS)
Arefin, Md Shamsul; Bulut Coskun, M.; Alan, Tuncay; Redoute, Jean-Michel; Neild, Adrian; Rasit Yuce, Mehmet
2014-06-01
This work presents a microfabricated fringe-field capacitive pH sensor using interdigitated electrodes and an integrated modulation-based readout circuit. The changes in capacitance of the sensor result from the permittivity changes due to pH variations and are converted to frequency shifts using a crossed-coupled voltage controlled oscillator readout circuit. The shift in resonant frequency of the readout circuit is 30.96 MHz for a change in pH of 1.0-5.0. The sensor can be used for the measurement of low pH levels, such as gastric acid, and can be integrated with electronic pills. The measurement results show high repeatability, low noise, and a stable output.
Pan, Pengmin; McDonald, Timothy; Fulton, John; Via, Brian; Hung, John
2016-12-23
An 8-electrode capacitance tomography (ECT) sensor was built and used to measure moisture content (MC) and mass flow of pine chip flows. The device was capable of directly measuring total water quantity in a sample but was sensitive to both dry matter and moisture, and therefore required a second measurement of mass flow to calculate MC. Two means of calculating the mass flow were used: the first being an impact sensor to measure total mass flow, and the second a volumetric approach based on measuring total area occupied by wood in images generated using the capacitance sensor's tomographic mode. Tests were made on 109 groups of wood chips ranging in moisture content from 14% to 120% (dry basis) and wet weight of 280 to 1100 g. Sixty groups were randomly selected as a calibration set, and the remaining were used for validation of the sensor's performance. For the combined capacitance/force transducer system, root mean square errors of prediction (RMSEP) for wet mass flow and moisture content were 13.42% and 16.61%, respectively. RMSEP using the combined volumetric mass flow/capacitance sensor for dry mass flow and moisture content were 22.89% and 24.16%, respectively. Either of the approaches was concluded to be feasible for prediction of moisture content in pine chip flows, but combining the impact and capacitance sensors was easier to implement. In situations where flows could not be impeded, however, the tomographic approach would likely be more useful.
Applications of pressure-sensitive dielectric elastomer sensors
NASA Astrophysics Data System (ADS)
Böse, Holger; Ocak, Deniz; Ehrlich, Johannes
2016-04-01
Dielectric elastomer sensors for the measurement of compression loads with high sensitivity are described. The basic design of the sensors exhibits two profiled surfaces between which an elastomer film is confined. All components of the sensor were prepared with silicone whose stiffness can be varied in a wide range. Depending on details of the sensor design, various effects contribute to the enhancement of the capacitance. The intermediate elastomer film is stretched upon compression and electrode layers on the elastomer profiles and in the elastomer film approach each other. Different designs of the pressure sensor give rise to very different sensor characteristics in terms of the dependence of electric capacitance on compression force. Due to their inherent flexibility, the pressure sensors can be used on compliant substrates such as seats or beds or on the human body. This gives rise to numerous possible applications. The contribution describes also some examples of possible sensor applications. A glove was equipped with various sensors positioned at the finger tips. When grabbing an object with the glove, the sensors can detect the gripping forces of the individual fingers with high sensitivity. In a demonstrator of the glove equipped with seven sensors, the capacitances representing the gripping forces are recorded on a display. In another application example, a lower limb prosthesis was equipped with a pressure sensor to detect the load on the remaining part of the leg and the load is displayed in terms of the measured capacitance. The benefit of such sensors is to detect an eventual overload in order to prevent possible pressure sores. A third example introduces a seat load sensor system based on four extended pressure sensor mats. The sensor system detects the load distribution of a person on the seat. The examples emphasize the high performance of the new pressure sensor technology.
NASA Astrophysics Data System (ADS)
Zhu, Ruo-Gu; Jiang, Kun; Qing, Zhao-Bo; Liu, Yue-Hui; Yan, Jun
2006-11-01
Taiji image originated from ancient China. It is not only the Taoism emblem but also the ancient graphic presentation sign to everything origin. It either has a too far-reaching impact on traditional culture of China, or is influencing the development of current natural science. On the basis of analyzing the classical philosophic theory of two-dimensional (2-D) Taiji image, we developed it into the model of complex interior surface-three-dimensional (3-D) Taiji ball, and explored its possible applications. Combining modern mathematics and physics knowledge, we have studied on the physical meaning of 3-D Taiji ball, thus the plane change of original Taiji image is developed into space change which is more close to the real world. The change layers are obvious increased notably, and the amount of information included in this model increases correspondingly. We also realized a special paper 3-D Taiji ball whose surface is coved with metal foil by means of laser manufacture. A new experiment set-up for measuring micro displace has been designed and constituted thus the relation between capacitance and micro displacement for the 3-D Taiji ball has performed. Experimental and theoretical analyses are also finished. This models of 3-D Taiji ball for physical characteristics are the first time set up. Experimental data and fitting curves between capacitance and micro displacement for the special paper Taiji ball coved with metal foil are suggested. It is shown that the special Taiji ball has less leakage capacitance or more strengthen electric field than an ordinary half ball capacitance. Finally their potential applied values are explored.
Transparent Fingerprint Sensor System for Large Flat Panel Display.
Seo, Wonkuk; Pi, Jae-Eun; Cho, Sung Haeung; Kang, Seung-Youl; Ahn, Seong-Deok; Hwang, Chi-Sun; Jeon, Ho-Sik; Kim, Jong-Uk; Lee, Myunghee
2018-01-19
In this paper, we introduce a transparent fingerprint sensing system using a thin film transistor (TFT) sensor panel, based on a self-capacitive sensing scheme. An armorphousindium gallium zinc oxide (a-IGZO) TFT sensor array and associated custom Read-Out IC (ROIC) are implemented for the system. The sensor panel has a 200 × 200 pixel array and each pixel size is as small as 50 μm × 50 μm. The ROIC uses only eight analog front-end (AFE) amplifier stages along with a successive approximation analog-to-digital converter (SAR ADC). To get the fingerprint image data from the sensor array, the ROIC senses a capacitance, which is formed by a cover glass material between a human finger and an electrode of each pixel of the sensor array. Three methods are reviewed for estimating the self-capacitance. The measurement result demonstrates that the transparent fingerprint sensor system has an ability to differentiate a human finger's ridges and valleys through the fingerprint sensor array.
Tan, Qiulin; Li, Chen; Xiong, Jijun; Jia, Pinggang; Zhang, Wendong; Liu, Jun; Xue, Chenyang; Hong, Yingping; Ren, Zhong; Luo, Tao
2014-01-01
In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists of an inductance, a variable capacitance, and a sealed cavity integrated in the alumina ceramic substrate using a thick-film integrated technology. The experimental results show that the proposed sensor has stability at 850 °C for more than 20 min. The characterization in high-temperature and pressure environments successfully demonstrated sensing capabilities for pressure from 1 to 5 bar up to 600 °C, limited by the sensor test setup. At 600 °C, the sensor achieves a linear characteristic response, and the repeatability error, hysteresis error and zero-point drift of the sensor are 8.3%, 5.05% and 1%, respectively. PMID:24487624
Transparent Fingerprint Sensor System for Large Flat Panel Display
Seo, Wonkuk; Pi, Jae-Eun; Cho, Sung Haeung; Kang, Seung-Youl; Ahn, Seong-Deok; Hwang, Chi-Sun; Jeon, Ho-Sik; Kim, Jong-Uk
2018-01-01
In this paper, we introduce a transparent fingerprint sensing system using a thin film transistor (TFT) sensor panel, based on a self-capacitive sensing scheme. An armorphousindium gallium zinc oxide (a-IGZO) TFT sensor array and associated custom Read-Out IC (ROIC) are implemented for the system. The sensor panel has a 200 × 200 pixel array and each pixel size is as small as 50 μm × 50 μm. The ROIC uses only eight analog front-end (AFE) amplifier stages along with a successive approximation analog-to-digital converter (SAR ADC). To get the fingerprint image data from the sensor array, the ROIC senses a capacitance, which is formed by a cover glass material between a human finger and an electrode of each pixel of the sensor array. Three methods are reviewed for estimating the self-capacitance. The measurement result demonstrates that the transparent fingerprint sensor system has an ability to differentiate a human finger’s ridges and valleys through the fingerprint sensor array. PMID:29351218
Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip
Yang, Ming-Zhi; Dai, Ching-Liang; Lu, De-Hao
2010-01-01
This study presents the design and fabrication of a capacitive micro humidity sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip is about 1 mm2. The humidity sensor consists of a sensing capacitor and a sensing film. The sensing capacitor is constructed from spiral interdigital electrodes that can enhance the sensitivity of the sensor. The sensing film of the sensor is polypyrrole, which is prepared by the chemical polymerization method, and the film has a porous structure. The sensor needs a post-CMOS process to coat the sensing film. The post-CMOS process uses a wet etching to etch the sacrificial layers, and then the polypyrrole is coated on the sensing capacitor. The sensor generates a change in capacitance when the sensing film absorbs or desorbs vapor. The ring oscillator circuit converts the capacitance variation of the sensor into the oscillation frequency output. Experimental results show that the sensitivity of the humidity sensor is about 99 kHz/%RH at 25 °C. PMID:22163459
Polypyrrole porous micro humidity sensor integrated with a ring oscillator circuit on chip.
Yang, Ming-Zhi; Dai, Ching-Liang; Lu, De-Hao
2010-01-01
This study presents the design and fabrication of a capacitive micro humidity sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip is about 1 mm(2). The humidity sensor consists of a sensing capacitor and a sensing film. The sensing capacitor is constructed from spiral interdigital electrodes that can enhance the sensitivity of the sensor. The sensing film of the sensor is polypyrrole, which is prepared by the chemical polymerization method, and the film has a porous structure. The sensor needs a post-CMOS process to coat the sensing film. The post-CMOS process uses a wet etching to etch the sacrificial layers, and then the polypyrrole is coated on the sensing capacitor. The sensor generates a change in capacitance when the sensing film absorbs or desorbs vapor. The ring oscillator circuit converts the capacitance variation of the sensor into the oscillation frequency output. Experimental results show that the sensitivity of the humidity sensor is about 99 kHz/%RH at 25 °C.
Optimization of the coplanar interdigital capacitive sensor
NASA Astrophysics Data System (ADS)
Huang, Yunzhi; Zhan, Zheng; Bowler, Nicola
2017-02-01
Interdigital capacitive sensors are applied in nondestructive testing and material property characterization of low-conductivity materials. The sensor performance is typically described based on the penetration depth of the electric field into the sample material, the sensor signal strength and its sensitivity. These factors all depend on the geometry and material properties of the sensor and sample. In this paper, a detailed analysis is provided, through finite element simulations, of the ways in which the sensor's geometrical parameters affect its performance. The geometrical parameters include the number of digits forming the interdigital electrodes and the ratio of digit width to their separation. In addition, the influence of the presence or absence of a metal backplane on the sample is analyzed. Further, the effects of sensor substrate thickness and material on signal strength are studied. The results of the analysis show that it is necessary to take into account a trade-off between the desired sensitivity and penetration depth when designing the sensor. Parametric equations are presented to assist the sensor designer or nondestructive evaluation specialist in optimizing the design of a capacitive sensor.
High Temperature Capacitive Pressure Sensor Employing a SiC Based Ring Oscillator
NASA Technical Reports Server (NTRS)
Meredith, Roger D.; Neudeck, Philip G.; Ponchak, George E.; Beheim, Glenn M.; Scardelletti, Maximilian; Jordan, Jennifer L.; Chen, Liang-Yu; Spry, David J.; Krawowski, Michael J.; Hunter, Gary W.
2011-01-01
In an effort to develop harsh environment electronic and sensor technologies for aircraft engine safety and monitoring, we have used capacitive-based pressure sensors to shift the frequency of a SiC-electronics-based oscillator to produce a pressure-indicating signal that can be readily transmitted, e.g. wirelessly, to a receiver located in a more benign environment. Our efforts target 500 C, a temperature well above normal operating conditions of commercial circuits but within areas of interest in aerospace engines, deep mining applications and for future missions to the Venus atmosphere. This paper reports for the first time a ring oscillator circuit integrated with a capacitive pressure sensor, both operating at 500 C. This demonstration represents a significant step towards a wireless pressure sensor that can operate at 500 C and confirms the viability of 500 C electronic sensor systems.
Superconducting rebalance acceleration and rate sensor
NASA Technical Reports Server (NTRS)
Torti, R.; Gerver, M.; Gondhalekar, V.; Maxwell, B.
1994-01-01
The goal of this program is the development of a high precision multisensor based on a high T(sub c) superconducting proof mass. The design of a prototype is currently underway. Key technical issues appear resolvable. High temperature superconductors have complicated, hysteretic flux dynamics but the forces on them can be linearly controlled for small displacements. Current data suggests that the forces on the superconductors decay over a short time frame and then stabilize, though very long term data is not available. The hysteretic force characteristics are substantial for large scale excursions, but do not appear to be an issue for the very small displacements required in this device. Sufficient forces can be exerted for non-contact suspension of a centimeter sized proof mass in a vacuum sealed nitrogen jacket cryostat. High frequency capacitive sensing using stripline technology will yield adequate position resolution for 0.1 micro-g measurements at 100 Hz. Overall, a reasonable cost, but very high accuracy, system is feasible with this technology.
Superconducting rebalance acceleration and rate sensor
NASA Astrophysics Data System (ADS)
Torti, R.; Gerver, M.; Gondhalekar, V.; Maxwell, B.
1994-05-01
The goal of this program is the development of a high precision multisensor based on a high T(sub c) superconducting proof mass. The design of a prototype is currently underway. Key technical issues appear resolvable. High temperature superconductors have complicated, hysteretic flux dynamics but the forces on them can be linearly controlled for small displacements. Current data suggests that the forces on the superconductors decay over a short time frame and then stabilize, though very long term data is not available. The hysteretic force characteristics are substantial for large scale excursions, but do not appear to be an issue for the very small displacements required in this device. Sufficient forces can be exerted for non-contact suspension of a centimeter sized proof mass in a vacuum sealed nitrogen jacket cryostat. High frequency capacitive sensing using stripline technology will yield adequate position resolution for 0.1 micro-g measurements at 100 Hz. Overall, a reasonable cost, but very high accuracy, system is feasible with this technology.
Simple fabricating PCB-based inter digital capacitor for glucose biosensor
NASA Astrophysics Data System (ADS)
Jamaluddin, Anif; Taufik, Usman; Iriani, Yofentina; Budiawanti, Sri; Suyitno
2017-01-01
This paper presents the simple fabrication of interdigital capacitor (IDC) using print circuit board (PCB) for glucose biosensor. PCB type FR04 laminated with Cu as electrode was used as sensor base. The IDC pattern of sensor was designed by computer aided design program and printed with a laser printer on plastic polymers. Then, the IDC pattern was transferred into PCB by a laminating machine. The etching process of PCB was done by immersing in ferric chloride liquid to form Cu pattern. There were five patterns of sensors including 5, 10, 15, 20 and 25 patterns. The capacitance value of PCB was measured with RCL meter when IDC biosensor was put in air, aquades, and glucose liquid with various moles of glucose (0.02, 0.04, 0.06, 0.08, 0.1M). In air medium, the increase of pattern number of IDC sensor (from 5 to 25) caused the sensor capacitance rose from 22 pf to 46 pf. In addition, the capacitance of sensor was dramatically increased until 0.36 µf while IDC sensor with 25 patterns was put in aquades medium. In liquid glucose medium, the capacitance of IDC biosensor with 25 patterns increased until 0.58 µf on 0.1 M glucose liquid.
NASA Astrophysics Data System (ADS)
Khan, F. A.; Yousaf, A.; Reindl, L. M.
2018-04-01
This paper presents a multi segment capacitive level monitoring sensor based on distributed E-fields approach Glocal. This approach has an advantage to analyze build-up problem by the local E-fields as well the fluid level monitoring by the global E-fields. The multi segment capacitive approach presented within this work addresses the main problem of unwanted parasitic capacitance generated from Copper (Cu) strips by applying active shielding concept. Polyvinyl chloride (PVC) is used for isolation and parafilm is used for creating artificial build-up on a CLS.
Direct Printing of Stretchable Elastomers for Highly Sensitive Capillary Pressure Sensors.
Liu, Wenguang; Yan, Chaoyi
2018-03-28
We demonstrate the successful fabrication of highly sensitive capillary pressure sensors using an innovative 3D printing method. Unlike conventional capacitive pressure sensors where the capacitance changes were due to the pressure-induced interspace variations between the parallel plate electrodes, in our capillary sensors the capacitance was determined by the extrusion and extraction of liquid medium and consequent changes of dielectric constants. Significant pressure sensitivity advances up to 547.9 KPa -1 were achieved. Moreover, we suggest that our innovative capillary pressure sensors can adopt a wide range of liquid mediums, such as ethanol, deionized water, and their mixtures. The devices also showed stable performances upon repeated pressing cycles. The direct and versatile printing method combined with the significant performance advances are expected to find important applications in future stretchable and wearable electronics.
Micromachined low frequency rocking accelerometer with capacitive pickoff
Lee, Abraham P.; Simon, Jonathon N.; McConaghy, Charles F.
2001-01-01
A micro electro mechanical sensor that uses capacitive readout electronics. The sensor involves a micromachined low frequency rocking accelerometer with capacitive pickoff fabricated by deep reactive ion etching. The accelerometer includes a central silicon proof mass, is suspended by a thin polysilicon tether, and has a moving electrode (capacitor plate or interdigitated fingers) located at each end the proof mass. During movement (acceleration), the tethered mass moves relative to the surrounding packaging, for example, and this defection is measured capacitively by a plate capacitor or interdigitated finger capacitor, having the cooperating fixed electrode (capacitor plate or interdigitated fingers) positioned on the packaging, for example. The micromachined rocking accelerometer has a low frequency (<500 Hz), high sensitivity (.mu.G), with minimal power usage. The capacitors are connected to a power supply (battery) and to sensor interface electronics, which may include an analog to digital (A/D) converter, logic, RF communication link, antenna, etc. The sensor (accelerometer) may be, for example, packaged along with the interface electronics and a communication system in a 2".times.2".times.2" cube. The proof mass may be asymmetric or symmetric. Additional actuating capacitive plates may be used for feedback control which gives a greater dynamic range.
Takahata, Kenichi; Gianchandani, Yogesh B.
2008-01-01
This paper reports a micromachined capacitive pressure sensor intended for applications that require mechanical robustness. The device is constructed with two micromachined metal plates and an intermediate polymer layer that is soft enough to deform in a target pressure range. The plates are formed of micromachined stainless steel fabricated by batch-compatible micro-electro-discharge machining. A polyurethane room-temperature-vulcanizing liquid rubber of 38-μm thickness is used as the deformable material. This structure eliminates both the vacuum cavity and the associated lead transfer challenges common to micromachined capacitive pressure sensors. For frequency-based interrogation of the capacitance, passive inductor-capacitor tanks are fabricated by combining the capacitive sensor with an inductive coil. The coil has 40 turns of a 127-μm-diameter copper wire. Wireless sensing is demonstrated in liquid by monitoring the variation in the resonant frequency of the tank via an external coil that is magnetically coupled with the tank. The sensitivity at room temperature is measured to be 23-33 ppm/KPa over a dynamic range of 340 KPa, which is shown to match a theoretical estimation. Temperature dependence of the tank is experimentally evaluated. PMID:27879824
NASA Astrophysics Data System (ADS)
Prusty, Arun Kumar; Bhand, Sunil
2017-03-01
A capacitive sensor for 2,4-dichloro phenoxy acetic acid(2,4-D) determination in drinking water has been developed using molecularly imprinted polypyrrole on pencil graphite electrode (PGE). Molecular imprinted polymer (MIP) coated PGE was prepared by electropolymerization of pyrrole via chronopotentiometry in the presence of 2,4-D as the template molecule. The prepared electrodes were characterized by field emission gun-scanning electron microscopy, cyclic voltammetry, and electrochemical impedance spectroscopy (EIS). The capacitance change of MIP electrode was measured in the presence of 2,4-D using EIS. The developed capacitive sensor exhibited a linear range 0.06-1.25 µg l-1 2,4-D with limit of detection of 0.02 µg l-1 and good selectivity towards 2,4-D in water with recovery from 92 to 110%. The results suggest the viable applicability of the MIP/PGE based sensor for the determination of the 2,4-D in water samples.
Aoyagi, Wataru; Omiya, Masaki
2016-01-01
An ionic polymer-metal composite (IPMC) actuator composed of a thin perfluorinated ionomer membrane with electrodes plated on both surfaces undergoes a large bending motion when a low electric field is applied across its thickness. Such actuators are soft, lightweight, and able to operate in solutions and thus show promise with regard to a wide range of applications, including MEMS sensors, artificial muscles, biomimetic systems, and medical devices. However, the variations induced by changing the type of anion on the device deformation properties are not well understood; therefore, the present study investigated the effects of different anions on the ion exchange process and the deformation behavior of IPMC actuators with palladium electrodes. Ion exchange was carried out in solutions incorporating various anions and the actuator tip displacement in deionized water was subsequently measured while applying a step voltage. In the step voltage response measurements, larger anions such as nitrate or sulfate led to a more pronounced tip displacement compared to that obtained with smaller anions such as hydroxide or chloride. In AC impedance measurements, larger anions generated greater ion conductivity and a larger double-layer capacitance at the cathode. Based on these mechanical and electrochemical measurements, it is concluded that the presence of larger anions in the ion exchange solution induces a greater degree of double-layer capacitance at the cathode and results in enhanced tip deformation of the IPMC actuators. PMID:28773599
Static and cyclic performance evaluation of sensors for human interface pressure measurement.
Dabling, Jeffrey G; Filatov, Anton; Wheeler, Jason W
2012-01-01
Researchers and clinicians often desire to monitor pressure distributions on soft tissues at interfaces to mechanical devices such as prosthetics, orthotics or shoes. The most common type of sensor used for this type of applications is a Force Sensitive Resistor (FSR) as these are convenient to use and inexpensive. Several other types of sensors exist that may have superior sensing performance but are less ubiquitous or more expensive, such as optical or capacitive sensors. We tested five sensors (two FSRs, one optical, one capacitive and one fluid pressure) in a static drift and cyclic loading configuration. The results show that relative to the important performance characteristics for soft tissue pressure monitoring (i.e. hysteresis, drift), many of the sensors tested have significant limitations. The FSRs exhibited hysteresis, drift and loss of sensitivity under cyclic loading. The capacitive sensor had substantial drift. The optical sensor had some hysteresis and temperature-related drift. The fluid pressure sensor performed well in these tests but is not as flat as the other sensors and is not commercially available. Researchers and clinicians should carefully consider the convenience and performance trade-offs when choosing a sensor for soft-tissue pressure monitoring.
Comparison of measurement methods for capacitive tactile sensors and their implementation
NASA Astrophysics Data System (ADS)
Tarapata, Grzegorz; Sienkiewicz, Rafał
2015-09-01
This paper presents a review of ideas and implementations of measurement methods utilized for capacity measurements in tactile sensors. The paper describes technical method, charge amplification method, generation and as well integration method. Three selected methods were implemented in dedicated measurement system and utilised for capacitance measurements of ourselves made tactile sensors. The tactile sensors tested in this work were fully fabricated with the inkjet printing technology. The tests result were presented and summarised. The charge amplification method (CDC) was selected as the best method for the measurement of the tactile sensors.
Improved Capacitive Liquid Sensor
NASA Technical Reports Server (NTRS)
Waldman, Francis A.
1992-01-01
Improved capacitive sensor used to detect presence and/or measure thickness of layer of liquid. Electrical impedance or admittance of sensor measured at prescribed frequency, and thickness of liquid inferred from predetermined theoretical or experimental relationship between impedance and thickness. Sensor is basically a three-terminal device. Features interdigitated driving and sensing electrodes and peripheral coplanar ground electrode that reduces parasitic effects. Patent-pending because first to utilize ground plane as "shunting" electrode. System less expensive than infrared, microwave, or refractive-index systems. Sensor successfully evaluated in commercial production plants to characterize emulsions, slurries, and solutions.
Fabrication of a printed capacitive air-gap touch sensor
NASA Astrophysics Data System (ADS)
Lee, Sang Hoon; Seo, Hwiwon; Lee, Sangyoon
2018-05-01
Unlike lithography-based processes, printed electronics does not require etching, which makes it difficult to fabricate electronic devices with an air gap. In this study, we propose a method to fabricate capacitive air-gap touch sensors via printing and coating. First, the bottom electrode was fabricated on a flexible poly(ethylene terephthalate) (PET) substrate using roll-to-roll gravure printing with silver ink. Then poly(dimethylsiloxane) (PDMS) was spin coated to form a sacrificial layer. The top electrode was fabricated on the sacrificial layer by spin coating with a stretchable silver ink. The sensor samples were then put in a tetrabutylammonium (TBAF) bath to generate the air gap by removing the sacrificial layer. The capacitance of the samples was measured for verification, and the results show that the capacitance increases in proportion to the applied force from 0 to 2.5 N.
Chen, Yan-Sheng; Hsieh, Gen-Wen; Chen, Shih-Ping; Tseng, Pin-Yen; Wang, Cheng-Wei
2015-01-14
Polymer capacitive pressure sensors based on a dielectric composite layer of zinc oxide nanowire and poly(methyl methacrylate) show pressure sensitivity in the range of 2.63 × 10(-3) to 9.95 × 10(-3) cm(2) gf(-1). This represents an increase of capacitance change by as much as a factor of 23 over pristine polymer devices. An ultralight load of only 10 mg (corresponding to an applied pressure of ∼0.01 gf cm(-2)) can be clearly recognized, demonstrating remarkable characteristics of these nanowire-polymer capacitive pressure sensors. In addition, optical transmittance of the dielectric composite layer is approximately 90% in the visible wavelength region. Their low processing temperature, transparency, and flexible dielectric film makes them a highly promising means for flexible touching and pressure-sensing applications.
Using a 2D displacement sensor to derive 3D displacement information
NASA Technical Reports Server (NTRS)
Soares, Schubert F. (Inventor)
2002-01-01
A 2D displacement sensor is used to measure displacement in three dimensions. For example, the sensor can be used in conjunction with a pulse-modulated or frequency-modulated laser beam to measure displacement caused by deformation of an antenna on which the sensor is mounted.
The capacitive proximity sensor based on transients in RC-circuits
NASA Astrophysics Data System (ADS)
Yakunin, A. G.
2018-05-01
The principle of operation of the capacitive proximity sensor is described. It can be used in various robotic complexes, automation systems and alarm devices to inform the control device of the approach to the sensor sensitive surface of an object. At the heart of the device is the measurement of the change in the current of the transient accompanying the charge of the reference capacitor because of the parallel connection to it the capacitance formed by the sensitive sensor surface and the external object. At the heart of the device is the measurement of the change in the current of the transient accompanying the charge of the reference capacitor caused by the parallel connection to it the capacitance formed by the sensitive sensor surface and the external object. As shown by theoretical and experimental studies, the value of this capacity, depending on the purpose of the device, can vary within very wide limits. In this case, the sensitive surface can be both a piece of ordinary wire several centimeters long, and a metall plate or grid, the area of which can reach units and even tens of square meters. The main advantage of the proposed solution is a significant reduction in the effect of spurious leakage currents arising at the capacitance of the measuring electrode under the influence of pollution and humidity of the environment.
Ye, Yong; Deng, Jiahao; Shen, Sanmin; Hou, Zhuo; Liu, Yuting
2016-01-01
A novel method for proximity detection of moving targets (with high dielectric constants) using a large-scale (the size of each sensor is 31 cm × 19 cm) planar capacitive sensor system (PCSS) is proposed. The capacitive variation with distance is derived, and a pair of electrodes in a planar capacitive sensor unit (PCSU) with a spiral shape is found to have better performance on sensitivity distribution homogeneity and dynamic range than three other shapes (comb shape, rectangular shape, and circular shape). A driving excitation circuit with a Clapp oscillator is proposed, and a capacitance measuring circuit with sensitivity of 0.21 Vp−p/pF is designed. The results of static experiments and dynamic experiments demonstrate that the voltage curves of static experiments are similar to those of dynamic experiments; therefore, the static data can be used to simulate the dynamic curves. The dynamic range of proximity detection for three projectiles is up to 60 cm, and the results of the following static experiments show that the PCSU with four neighboring units has the highest sensitivity (the sensitivities of other units are at least 4% lower); when the attack angle decreases, the intensity of sensor signal increases. This proposed method leads to the design of a feasible moving target detector with simple structure and low cost, which can be applied in the interception system. PMID:27196905
Smart measurement system for resistive (bridge) or capacitive sensors
NASA Astrophysics Data System (ADS)
Wang, Guijie; Meijer, Gerard C. M.
1998-07-01
A low-cost smart measurement system for resistive (bridge) and capacitive sensors is presented and demonstrated. The measurement system consists of three main parts: the sensor element, a universal transducer interface (UTI) and a microcontroller. The UTI is a sensor-signal-to-time converter, based on a period-modulated oscillator, which is equipped with front-ends for many types of resistive (bridge) and capacitive sensors, and which generates a microcontroller-compatible output signal. The microcontroller performs data acquisition of the output signals from the interface UTI, controls the working status of the UTI for a specified application and communicates with a personal computer. Continuous auto-calibration of the offset and the gain of the complete system is applied to eliminate many nonidealities. Experimental results show that the accuracy and resolution are 14 bits and 16 bits, respectively, for a measurement time of about 100 ms.
NASA Astrophysics Data System (ADS)
Jang, Munseon; Yun, Kwang-Seok
2017-12-01
In this paper, we presents a MEMS pressure sensor integrated with a readout circuit on a chip for an on-chip signal processing. The capacitive pressure sensor is formed on a CMOS chip by using a post-CMOS MEMS processes. The proposed device consists of a sensing capacitor that is square in shape, a reference capacitor and a readout circuitry based on a switched-capacitor scheme to detect capacitance change at various environmental pressures. The readout circuit was implemented by using a commercial 0.35 μm CMOS process with 2 polysilicon and 4 metal layers. Then, the pressure sensor was formed by wet etching of metal 2 layer through via hole structures. Experimental results show that the MEMS pressure sensor has a sensitivity of 11 mV/100 kPa at the pressure range of 100-400 kPa.
Inductive-capacitive resonant circuit sensors for structural health and environmental monitoring
NASA Astrophysics Data System (ADS)
DeRouin, Andrew J.
Inductive-capacitive (LC) sensors are low-cost, wireless, durable, simple to fabricate and battery-less. Consequently, they are well suited to sensing applications in harsh environments or where large numbers of sensors are needed. Due to their many advantages, LC sensors have been used for sensing a variety of parameters including humidity, temperature, chemical concentrations, pH, stress/pressure, strain, food quality and even biological growth. However, current versions of the LC sensor technology are limited to sensing only one parameter. This work focuses on the development and characterization of two new sensor designs that address this limitation in addition to significantly reducing the overall sensor footprint and thus the sensor unit cost.
Greenshields, Márcia W C C; Meruvia, Michelle S; Hümmelgen, Ivo A; Coville, Neil J; Mhlanga, Sabelo D; Ceragioli, Helder J; Quispe, Jose C Rojas; Baranauskas, Vitor
2011-03-01
We report the preparation of inexpensive ethanol sensor devices using multiwalled carbon nanotube-polyvinyl alcohol composite films deposited onto interdigitated electrodes patterned on phenolite substrates. We investigate the frequency dependent response of the device conductance and capacitance showing that higher sensitivity is obtained at higher frequency if the conductance is used as sensing parameter. In the case of capacitance measurements, higher sensitivity is obtained at low frequency. Ethanol detection at a concentration of 300 ppm in air is demonstrated. More than 80% of the sensor conductance and capacitance variation response occurs in less than 20 s.
NASA Astrophysics Data System (ADS)
Chang, Chun-I.; Tsai, Ming-Han; Liu, Yu-Chia; Sun, Chih-Ming; Fang, Weileun
2013-09-01
This study exploits the foundry available complimentary metal-oxide-semiconductor (CMOS) process and the packaging house available pick-and-place technology to implement a capacitive type micromachined 2-axis tilt sensor. The suspended micro mechanical structures such as the spring, stage and sensing electrodes are fabricated using the CMOS microelectromechanical systems (MEMS) processes. A bulk block is assembled onto the suspended stage by pick-and-place technology to increase the proof-mass of the tilt sensor. The low temperature UV-glue dispensing and curing processes are employed to bond the block onto the stage. Thus, the sensitivity of the CMOS MEMS capacitive type 2-axis tilt sensor is significantly improved. In application, this study successfully demonstrates the bonding of a bulk solder ball of 100 µm in diameter with a 2-axis tilt sensor fabricated using the standard TSMC 0.35 µm 2P4M CMOS process. Measurements show the sensitivities of the 2-axis tilt sensor are increased for 2.06-fold (x-axis) and 1.78-fold (y-axis) after adding the solder ball. Note that the sensitivity can be further improved by reducing the parasitic capacitance and the mismatch of sensing electrodes caused by the solder ball.
NASA Technical Reports Server (NTRS)
Scardelletti, Maximilian C.; Ponchak, George E.; Harsh, Kevin; Mackey, Jonathan A.; Meredith, Roger D.; Zorman, Christian A.; Beheim, Glenn M.; Dynys, Frederick W.; Hunter, Gary W.
2014-01-01
In this paper, a wireless capacitive pressure sensor developed for the health monitoring of aircraft engines has been demonstrated. The sensing system is composed of a Clapp-type oscillator that operates at 131 MHz. The Clapp oscillator is fabricated on a alumina substrate and consists of a Cree SiC (silicon carbide) MESFET (Metal Semiconductor Field Effect Transistors), this film inductor, Compex chip capacitors and Sporian Microsystem capacitive pressure sensor. The resonant tank circuit within the oscillator is made up of the pressure sensor and a spiral thin film inductor, which is used to magnetically couple the wireless pressure sensor signal to a coil antenna placed over 1 meter away. 75% of the power used to bias the sensing system is generated from thermoelectric power modules. The wireless pressure sensor is operational at room temperature through 400 C from 0 to 100 psi and exhibits a frequency shift of over 600 kHz.
A two-ply polymer-based flexible tactile sensor sheet using electric capacitance.
Guo, Shijie; Shiraoka, Takahisa; Inada, Seisho; Mukai, Toshiharu
2014-01-29
Traditional capacitive tactile sensor sheets usually have a three-layered structure, with a dielectric layer sandwiched by two electrode layers. Each electrode layer has a number of parallel ribbon-like electrodes. The electrodes on the two electrode layers are oriented orthogonally and each crossing point of the two perpendicular electrode arrays makes up a capacitive sensor cell on the sheet. It is well known that compatibility between measuring precision and resolution is difficult, since decreasing the width of the electrodes is required to obtain a high resolution, however, this may lead to reduction of the area of the sensor cells, and as a result, lead to a low Signal/Noise (S/N) ratio. To overcome this problem, a new multilayered structure and related calculation procedure are proposed. This new structure stacks two or more sensor sheets with shifts in position. Both a high precision and a high resolution can be obtained by combining the signals of the stacked sensor sheets. Trial production was made and the effect was confirmed.
Phase discriminating capacitive array sensor system
NASA Technical Reports Server (NTRS)
Vranish, John M. (Inventor); Rahim, Wadi (Inventor)
1993-01-01
A phase discriminating capacitive sensor array system which provides multiple sensor elements which are maintained at a phase and amplitude based on a frequency reference provided by a single frequency stabilized oscillator. Sensor signals provided by the multiple sensor elements are controlled by multiple phase control units, which correspond to the multiple sensor elements, to adjust the sensor signals from the multiple sensor elements based on the frequency reference. The adjustment made to the sensor signals is indicated by output signals which indicate the proximity of the object. The output signals may also indicate the closing speed of the object based on the rate of change of the adjustment made, and the edges of the object based on a sudden decrease in the adjustment made.
Capacitive touch sensing : signal and image processing algorithms
NASA Astrophysics Data System (ADS)
Baharav, Zachi; Kakarala, Ramakrishna
2011-03-01
Capacitive touch sensors have been in use for many years, and recently gained center stage with the ubiquitous use in smart-phones. In this work we will analyze the most common method of projected capacitive sensing, that of absolute capacitive sensing, together with the most common sensing pattern, that of diamond-shaped sensors. After a brief introduction to the problem, and the reasons behind its popularity, we will formulate the problem as a reconstruction from projections. We derive analytic solutions for two simple cases: circular finger on a wire grid, and square finger on a square grid. The solutions give insight into the ambiguities of finding finger location from sensor readings. The main contribution of our paper is the discussion of interpolation algorithms including simple linear interpolation , curve fitting (parabolic and Gaussian), filtering, general look-up-table, and combinations thereof. We conclude with observations on the limits of the present algorithmic methods, and point to possible future research.
NASA Astrophysics Data System (ADS)
Kremastiotis, I.; Ballabriga, R.; Campbell, M.; Dannheim, D.; Fiergolski, A.; Hynds, D.; Kulis, S.; Peric, I.
2017-09-01
The concept of capacitive coupling between sensors and readout chips is under study for the vertex detector at the proposed high-energy CLIC electron positron collider. The CLICpix Capacitively Coupled Pixel Detector (C3PD) is an active High-Voltage CMOS sensor, designed to be capacitively coupled to the CLICpix2 readout chip. The chip is implemented in a commercial 180 nm HV-CMOS process and contains a matrix of 128×128 square pixels with 25μm pitch. First prototypes have been produced with a standard resistivity of ~20 Ωcm for the substrate and tested in standalone mode. The results show a rise time of ~20 ns, charge gain of 190 mV/ke- and ~40 e- RMS noise for a power consumption of 4.8μW/pixel. The main design aspects, as well as standalone measurement results, are presented.
A curved edge diffraction-utilized displacement sensor for spindle metrology
DOE Office of Scientific and Technical Information (OSTI.GOV)
Lee, ChaBum, E-mail: clee@tntech.edu; Zhao, Rui; Jeon, Seongkyul
This paper presents a new dimensional metrological sensing principle for a curved surface based on curved edge diffraction. Spindle error measurement technology utilizes a cylindrical or spherical target artifact attached to the spindle with non-contact sensors, typically a capacitive sensor (CS) or an eddy current sensor, pointed at the artifact. However, these sensors are designed for flat surface measurement. Therefore, measuring a target with a curved surface causes error. This is due to electric fields behaving differently between a flat and curved surface than between two flat surfaces. In this study, a laser is positioned incident to the cylindrical surfacemore » of the spindle, and a photodetector collects the total field produced by the diffraction around the target surface. The proposed sensor was compared with a CS within a range of 500 μm. The discrepancy between the proposed sensor and CS was 0.017% of the full range. Its sensing performance showed a resolution of 14 nm and a drift of less than 10 nm for 7 min of operation. This sensor was also used to measure dynamic characteristics of the spindle system (natural frequency 181.8 Hz, damping ratio 0.042) and spindle runout (22.0 μm at 2000 rpm). The combined standard uncertainty was estimated as 85.9 nm under current experiment conditions. It is anticipated that this measurement technique allows for in situ health monitoring of a precision spindle system in an accurate, convenient, and low cost manner.« less
Capacitively coupled RF voltage probe having optimized flux linkage
Moore, James A.; Sparks, Dennis O.
1999-02-02
An RF sensor having a novel current sensing probe and a voltage sensing probe to measure voltage and current. The current sensor is disposed in a transmission line to link all of the flux generated by the flowing current in order to obtain an accurate measurement. The voltage sensor is a flat plate which operates as a capacitive plate to sense voltage on a center conductor of the transmission line, in which the measured voltage is obtained across a resistance leg of a R-C differentiator circuit formed by the characteristic impedance of a connecting transmission line and a capacitance of the plate, which is positioned proximal to the center conductor.
Haque, Rubaiyet Iftekharul; Ogam, Erick; Benaben, Patrick; Boddaert, Xavier
2017-01-01
This paper describes the fabrication process and the method to determine the membrane tension and defects of an inkjet-printed circular diaphragm. The membrane tension is an important parameter to design and fabricate an acoustic sensor and resonator with the highest sensitivity and selectivity over a determined range of frequency. During this work, the diaphragms are fabricated by inkjet printing of conductive silver ink on pre-strained Mylar thin films, and the membrane tension is determined using the resonant frequency obtained from its measured surface velocity response to an acoustic excitation. The membrane is excited by an acoustic pressure generated by a loudspeaker, and its displacement (response) is acquired using a laser Doppler vibrometer (LDV). The response of the fabricated membrane demonstrates good correlation with the numerical result. However, the inkjet-printed membrane exhibits undesired peaks, which appeared to be due to defects at their boundaries as observed from the scanning mode of LDV. PMID:28481267
Haque, Rubaiyet Iftekharul; Ogam, Erick; Benaben, Patrick; Boddaert, Xavier
2017-05-06
This paper describes the fabrication process and the method to determine the membrane tension and defects of an inkjet-printed circular diaphragm. The membrane tension is an important parameter to design and fabricate an acoustic sensor and resonator with the highest sensitivity and selectivity over a determined range of frequency. During this work, the diaphragms are fabricated by inkjet printing of conductive silver ink on pre-strained Mylar thin films, and the membrane tension is determined using the resonant frequency obtained from its measured surface velocity response to an acoustic excitation. The membrane is excited by an acoustic pressure generated by a loudspeaker, and its displacement (response) is acquired using a laser Doppler vibrometer (LDV). The response of the fabricated membrane demonstrates good correlation with the numerical result. However, the inkjet-printed membrane exhibits undesired peaks, which appeared to be due to defects at their boundaries as observed from the scanning mode of LDV.
A Capacitance-To-Digital Converter for MEMS Sensors for Smart Applications.
Pérez Sanjurjo, Javier; Prefasi, Enrique; Buffa, Cesare; Gaggl, Richard
2017-06-07
The use of MEMS sensors has been increasing in recent years. To cover all the applications, many different readout circuits are needed. To reduce the cost and time to market, a generic capacitance-to-digital converter (CDC) seems to be the logical next step. This work presents a configurable CDC designed for capacitive MEMS sensors. The sensor is built with a bridge of MEMS, where some of them function with pressure. Then, the capacitive to digital conversion is realized using two steps. First, a switched-capacitor (SC) preamplifier is used to make the capacitive to voltage (C-V) conversion. Second, a self-oscillated noise-shaping integrating dual-slope (DS) converter is used to digitize this magnitude. The proposed converter uses time instead of amplitude resolution to generate a multibit digital output stream. In addition it performs noise shaping of the quantization error to reduce measurement time. This article shows the effectiveness of this method by measurements performed on a prototype, designed and fabricated using standard 0.13 µm CMOS technology. Experimental measurements show that the CDC achieves a resolution of 17 bits, with an effective area of 0.317 mm², which means a pressure resolution of 1 Pa, while consuming 146 µA from a 1.5 V power supply.
A Capacitance-To-Digital Converter for MEMS Sensors for Smart Applications
Pérez Sanjurjo, Javier; Prefasi, Enrique; Buffa, Cesare; Gaggl, Richard
2017-01-01
The use of MEMS sensors has been increasing in recent years. To cover all the applications, many different readout circuits are needed. To reduce the cost and time to market, a generic capacitance-to-digital converter (CDC) seems to be the logical next step. This work presents a configurable CDC designed for capacitive MEMS sensors. The sensor is built with a bridge of MEMS, where some of them function with pressure. Then, the capacitive to digital conversion is realized using two steps. First, a switched-capacitor (SC) preamplifier is used to make the capacitive to voltage (C-V) conversion. Second, a self-oscillated noise-shaping integrating dual-slope (DS) converter is used to digitize this magnitude. The proposed converter uses time instead of amplitude resolution to generate a multibit digital output stream. In addition it performs noise shaping of the quantization error to reduce measurement time. This article shows the effectiveness of this method by measurements performed on a prototype, designed and fabricated using standard 0.13 µm CMOS technology. Experimental measurements show that the CDC achieves a resolution of 17 bits, with an effective area of 0.317 mm2, which means a pressure resolution of 1 Pa, while consuming 146 µA from a 1.5 V power supply. PMID:28590425
Wang, Shinn-Fwu
2009-01-01
A small-displacement sensor based on total-internal reflection theory and surface plasmon resonance technology is proposed for use in heterodyne interferometry. A small displacement can be obtained simply by measuring the variation in phase difference between s- and p-polarization states with the small-displacement sensor. The theoretical displacement resolution of the small-displacement sensor can reach 0.45 nm. The sensor has some additional advantages, e.g., a simple optical setup, high resolution, high sensitivity and rapid measurement. Its feasibility is also demonstrated.
Developing a polymeric sensor to monitor intracellular conditions
NASA Astrophysics Data System (ADS)
Mudarri, Timothy C.; Leo, Donald J.; Wood, Brett C.; Shires, Peter K.
2004-07-01
Ionic electroactive polymers have been developed as mechanical sensors or actuators, taking advantage of the electromechanical coupling of the materials. This research attempts to take advantage of the chemomechanical and chemoelectrical coupling by characterizing the transient response as the polymer undergoes an ion exchange, thus using the polymer for ionic sensing. Nafion is a biocompatible material, and an implantable polymeric ion sensor which has applications in the biomedical field for bone healing research. An ion sensor and a strain gauge could determine the effects of motion allowed at the fracture site, thus improving rehabilitation procedures for bone fractures. The charge sensitivity of the material and the capacitance of the material were analyzed to determine the transient response. Both measures indicate a change when immersed in ionic salt solutions. It is demonstrated that measuring the capacitance is the best indicator of an ion exchange. Relative to a flat response in deionized water (+/-2%), the capacitance of the polymer exhibits an exponential decay of ~25% of its peak when placed in a salt solution. A linear correlation between the time constant of the decay and the ionic size of the exchanging ion was developed that could reasonably predict a diffusing ion. Tests using an energy dispersive spectrometer (EDS) indicate that 90% of the exchange occurs in the first 20 minutes, shown by both capacitance decay and an atomic level scan. The diffusion rate time constant was found to within 0.3% of the capacitance time constant, confirming the ability of capacitance to measure ion exchange.
Phase-Discriminating Capacitive Sensor System
NASA Technical Reports Server (NTRS)
Vranish, John M.; Rahim, Wadi
1993-01-01
Crosstalk eliminated by maintaining voltages on all electrodes at same amplitude, phase, and frequency. Each output feedback-derived control voltage, change of which indicates proximity-induced change in capacitance of associated sensing electrode. Sensors placed close together, enabling imaging of sort. Images and/or output voltages used to guide robots in proximity to various objects.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Moro, Erik A.
Optical fiber sensors offer advantages over traditional electromechanical sensors, making them particularly well-suited for certain measurement applications. Generally speaking, optical fiber sensors respond to a desired measurand through modulation of an optical signal's intensity, phase, or wavelength. Practically, non-contacting fiber optic displacement sensors are limited to intensity-modulated and interferometric (or phase-modulated) methodologies. Intensity-modulated fiber optic displacement sensors relate target displacement to a power measurement. The simplest intensity-modulated sensor architectures are not robust to environmental and hardware fluctuations, since such variability may cause changes in the measured power level that falsely indicate target displacement. Differential intensity-modulated sensors have been implemented, offeringmore » robustness to such intensity fluctuations, and the speed of these sensors is limited only by the combined speed of the photodetection hardware and the data acquisition system (kHz-MHz). The primary disadvantages of intensity-modulated sensing are the relatively low accuracy (?m-mm for low-power sensors) and the lack of robustness, which consequently must be designed, often with great difficulty, into the sensor's architecture. White light interferometric displacement sensors, on the other hand, offer increased accuracy and robustness. Unlike their monochromatic-interferometer counterparts, white light interferometric sensors offer absolute, unambiguous displacement measurements over large displacement ranges (cm for low-power, 5 mW, sources), necessitating no initial calibration, and requiring no environmental or feedback control. The primary disadvantage of white light interferometric displacement sensors is that their utility in dynamic testing scenarios is limited, both by hardware bandwidth and by their inherent high-sensitivity to Doppler-effects. The decision of whether to use either an intensity-modulated interferometric sensor depends on an appropriate performance function (e.g., desired displacement range, accuracy, robustness, etc.). In this dissertation, the performance limitations of a bundled differential intensity-modulated displacement sensor are analyzed, where the bundling configuration has been designed to optimize performance. The performance limitations of a white light Fabry-Perot displacement sensor are also analyzed. Both these sensors are non-contacting, but they have access to different regions of the performance-space. Further, both these sensors have different degrees of sensitivity to experimental uncertainty. Made in conjunction with careful analysis, the decision of which sensor to deploy need not be an uninformed one.« less
NASA Astrophysics Data System (ADS)
Ye, Jiamin; Wang, Haigang; Yang, Wuqiang
2016-07-01
Electrical capacitance tomography (ECT) is based on capacitance measurements from electrode pairs mounted outside of a pipe or vessel. The structure of ECT sensors is vital to image quality. In this paper, issues with the number of electrodes and the electrode covering ratio for complex liquid-solids flows in a rotating device are investigated based on a new coupling simulation model. The number of electrodes is increased from 4 to 32 while the electrode covering ratio is changed from 0.1 to 0.9. Using the coupling simulation method, real permittivity distributions and the corresponding capacitance data at 0, 0.5, 1, 2, 3, 5, and 8 s with a rotation speed of 96 rotations per minute (rpm) are collected. Linear back projection (LBP) and Landweber iteration algorithms are used for image reconstruction. The quality of reconstructed images is evaluated by correlation coefficient compared with the real permittivity distributions obtained from the coupling simulation. The sensitivity for each sensor is analyzed and compared with the correlation coefficient. The capacitance data with a range of signal-to-noise ratios (SNRs) of 45, 50, 55 and 60 dB are generated to evaluate the effect of data noise on the performance of ECT sensors. Furthermore, the SNRs of experimental data are analyzed for a stationary pipe with permittivity distribution. Based on the coupling simulation, 16-electrode ECT sensors are recommended to achieve good image quality.
NASA Astrophysics Data System (ADS)
Haryono, Didied; Harjanto, Sri; Wijaya, Rifky; Oediyani, Soesaptri; Nugraha, Harisma; Huda, Mahfudz Al; Taruno, Warsito Purwo
2018-04-01
Investigation of column flotation process on sulphide ore using 2-electrode capacitance sensor is presented in this paper. The effect of air flow rate and solid percentage on column flotation process has been experimentally investigated. The purpose of this paper is to understand the capacitance signal characteristic affected by the air flow rate and the solid percentage which can be used to determine the metallurgical performance. Experiments were performed using a laboratory column flotation cell which has a diameter of 5 cm and the total height of 140 cm. The sintered ceramic sparger and wash water were installed at the bottom and above of the column. Two-electrode concave type capacitance sensor was also installed at a distance of 50 cm from the sparger. The sensor was attached to the outer wall of the column, connected to data acquisition system, manufactured by CTECH Labs Edwar Technology and personal computer for further data processing. Feed consisting ZnS and SiO2 with the ratio of 3:2 was mixed with some reagents to make 1 litre of slurry. The slurry was fed into the aerated column at 100 cm above the sparger with a constant rate and the capacitance signals were captured during the process. In this paper, 7.5 and 10% of solid and 2-4 L/min of air flow rate with 0.5 L/min intervals were used as independent variables. The results show that the capacitance signal characteristics between the 7.5 and 10% of solid are different at any given air flow rate in which the 10% solid produced signals higher than those of 7.5%. Metallurgical performance and capacitance signal exhibit a good correlation.
Siqueira, José R; Molinnus, Denise; Beging, Stefan; Schöning, Michael J
2014-06-03
The ideal combination among biomolecules and nanomaterials is the key for reaching biosensing units with high sensitivity. The challenge, however, is to find out a stable and sensitive film architecture that can be incorporated on the sensor's surface. In this paper, we report on the benefits of incorporating a layer-by-layer (LbL) nanofilm of polyamidoamine (PAMAM) dendrimer and carbon nanotubes (CNTs) on capacitive electrolyte-insulator-semiconductor (EIS) field-effect sensors for detecting urea. Three sensor arrangements were studied in order to investigate the adequate film architecture, involving the LbL film with the enzyme urease: (i) urease immobilized directly onto a bare EIS [EIS-urease] sensor; (ii) urease atop the LbL film over the EIS [EIS-(PAMAM/CNT)-urease] sensor; and (iii) urease sandwiched between the LbL film and another CNT layer [EIS-(PAMAM/CNT)-urease-CNT]. The surface morphology of all three urea-based EIS biosensors was investigated by atomic force microscopy (AFM), while the biosensing abilities were studied by means of capacitance-voltage (C/V) and dynamic constant-capacitance (ConCap) measureaments at urea concentrations ranging from 0.1 mM to 100 mM. The EIS-urease and EIS-(PAMAM/CNT)-urease sensors showed similar sensitivity (~18 mV/decade) and a nonregular signal behavior as the urea concentration increased. On the other hand, the EIS-(PAMAM/CNT)-urease-CNT sensor exhibited a superior output signal performance and higher sensitivity of about 33 mV/decade. The presence of the additional CNT layer was decisive to achieve a urea based EIS sensor with enhanced properties. Such sensitive architecture demonstrates that the incorporation of an adequate hybrid enzyme-nanofilm as sensing unit opens new prospects for biosensing applications using the field-effect sensor platform.
Ultrasensitive displacement sensor based on tunable horn-shaped resonators
NASA Astrophysics Data System (ADS)
Tian, Ying; Wu, Jiong; Yu, Le; Yang, Helin; Huang, Xiaojun
2018-04-01
In this paper, we proposed a novel double-deck displacement sensor with a high linearity based on tunable horn-shaped resonators. The designed sensor included two substrate layers etched with copper metallization in various shapes. When the upper trip-type resonator layer has a relative displacement to the bottom horn-shaped resonator layer, the resonance frequency of the sensor is redshift. High sensitivity of the sensor is around 207.2 MHz mm-1 with 4 mm linear dynamic range. We fabricate the sample of the proposed displacement sensor, in addition the simulated results are verified by experiment. The proposed displacement sensor is appropriate for using MEMS technology in further miniaturization.
Design of Moisture Content Detection System
NASA Astrophysics Data System (ADS)
Wang, W. C.; Wang, L.
In this paper, a method for measuring the moisture content of grain was presented based on single chip microcomputer and capacitive sensor. The working principle of measuring moisture content is introduced and a concentric cylinder type of capacitive sensor is designed, the signal processing circuits of system are described in details. System is tested in practice and discussions are made on the various factors affecting the capacitive measuring of grain moisture based on the practical experiments, experiment results showed that the system has high measuring accuracy and good controlling capacity.
Gating capacitive field-effect sensors by the charge of nanoparticle/molecule hybrids.
Poghossian, Arshak; Bäcker, Matthias; Mayer, Dirk; Schöning, Michael J
2015-01-21
The semiconductor field-effect platform is a powerful tool for chemical and biological sensing with direct electrical readout. In this work, the field-effect capacitive electrolyte-insulator-semiconductor (EIS) structure - the simplest field-effect (bio-)chemical sensor - modified with citrate-capped gold nanoparticles (AuNPs) has been applied for a label-free electrostatic detection of charged molecules by their intrinsic molecular charge. The EIS sensor detects the charge changes in AuNP/molecule inorganic/organic hybrids induced by the molecular adsorption or binding events. The feasibility of the proposed detection scheme has been exemplarily demonstrated by realizing capacitive EIS sensors consisting of an Al-p-Si-SiO2-silane-AuNP structure for the label-free detection of positively charged cytochrome c and poly-d-lysine molecules as well as for monitoring the layer-by-layer formation of polyelectrolyte multilayers of poly(allylamine hydrochloride)/poly(sodium 4-styrene sulfonate), representing typical model examples of detecting small proteins and macromolecules and the consecutive adsorption of positively/negatively charged polyelectrolytes, respectively. For comparison, EIS sensors without AuNPs have been investigated, too. The adsorption of molecules on the surface of AuNPs has been verified via the X-ray photoelectron spectroscopy method. In addition, a theoretical model of the functioning of the capacitive field-effect EIS sensor functionalized with AuNP/charged-molecule hybrids has been discussed.
Shentu, Nanying; Zhang, Hongjian; Li, Qing; Zhou, Hongliang; Tong, Renyuan; Li, Xiong
2012-01-01
Deep displacement observation is one basic means of landslide dynamic study and early warning monitoring and a key part of engineering geological investigation. In our previous work, we proposed a novel electromagnetic induction-based deep displacement sensor (I-type) to predict deep horizontal displacement and a theoretical model called equation-based equivalent loop approach (EELA) to describe its sensing characters. However in many landslide and related geological engineering cases, both horizontal displacement and vertical displacement vary apparently and dynamically so both may require monitoring. In this study, a II-type deep displacement sensor is designed by revising our I-type sensor to simultaneously monitor the deep horizontal displacement and vertical displacement variations at different depths within a sliding mass. Meanwhile, a new theoretical modeling called the numerical integration-based equivalent loop approach (NIELA) has been proposed to quantitatively depict II-type sensors' mutual inductance properties with respect to predicted horizontal displacements and vertical displacements. After detailed examinations and comparative studies between measured mutual inductance voltage, NIELA-based mutual inductance and EELA-based mutual inductance, NIELA has verified to be an effective and quite accurate analytic model for characterization of II-type sensors. The NIELA model is widely applicable for II-type sensors' monitoring on all kinds of landslides and other related geohazards with satisfactory estimation accuracy and calculation efficiency.
da Costa, Eduardo Ferreira; de Oliveira, Nestor E; Morais, Flávio J O; Carvalhaes-Dias, Pedro; Duarte, Luis Fernando C; Cabot, Andreu; Siqueira Dias, J A
2017-03-12
We present here the design and fabrication of a self-powered and autonomous fringing field capacitive sensor to measure soil water content. The sensor is manufactured using a conventional printed circuit board and includes a porous ceramic. To read the sensor, we use a circuit that includes a 10 kHz triangle wave generator, an AC amplifier, a precision rectifier and a microcontroller. In terms of performance, the sensor's capacitance (measured in a laboratory prototype) increases up to 5% when the volumetric water content of the porous ceramic changed from 3% to 36%, resulting in a sensitivity of S = 15.5 pF per unity change. Repeatability tests for capacitance measurement showed that the θ v sensor's root mean square error is 0.13%. The average current consumption of the system (sensor and signal conditioning circuit) is less than 1.5 μ A, which demonstrates its suitability for being powered by energy harvesting systems. We developed a complete irrigation control system that integrates the sensor, an energy harvesting module composed of a microgenerator installed on the top of a micro sprinkler spinner, and a DC/DC converter circuit that charges a 1 F supercapacitor. The energy harvesting module operates only when the micro sprinkler spinner is irrigating the soil, and the supercapacitor is fully charged to 5 V in about 3 h during the first irrigation. After the first irrigation, with the supercap fully charged, the system can operate powered only by the supercapacitor for approximately 23 days, without any energy being harvested.
Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment
Pavlin, Marko; Belavic, Darko; Novak, Franc
2012-01-01
This paper presents the design of a wireless pressure-monitoring system for harsh-environment applications. Two types of ceramic pressure sensors made with a low-temperature cofired ceramic (LTCC) were considered. The first type is a piezoresistive strain gauge pressure sensor. The second type is a capacitive pressure sensor, which is based on changes of the capacitance values between two electrodes: one electrode is fixed and the other is movable under an applied pressure. The design was primarily focused on low power consumption. Reliable operation in the presence of disturbances, like electromagnetic interference, parasitic capacitances, etc., proved to be contradictory constraints. A piezoresistive ceramic pressure sensor with a high bridge impedance was chosen for use in a wireless pressure-monitoring system and an acceptable solution using energy-harvesting techniques has been achieved. The described solution allows for the integration of a sensor element with an energy harvester that has a printed thick-film battery and complete electronics in a single substrate packaged inside a compact housing. PMID:22368471
Rough-Surface-Enabled Capacitive Pressure Sensors with 3D Touch Capability.
Lee, Kilsoo; Lee, Jaehong; Kim, Gwangmook; Kim, Youngjae; Kang, Subin; Cho, Sungjun; Kim, SeulGee; Kim, Jae-Kang; Lee, Wooyoung; Kim, Dae-Eun; Kang, Shinill; Kim, DaeEun; Lee, Taeyoon; Shim, Wooyoung
2017-11-01
Fabrication strategies that pursue "simplicity" for the production process and "functionality" for a device, in general, are mutually exclusive. Therefore, strategies that are less expensive, less equipment-intensive, and consequently, more accessible to researchers for the realization of omnipresent electronics are required. Here, this study presents a conceptually different approach that utilizes the inartificial design of the surface roughness of paper to realize a capacitive pressure sensor with high performance compared with sensors produced using costly microfabrication processes. This study utilizes a writing activity with a pencil and paper, which enables the construction of a fundamental capacitor that can be used as a flexible capacitive pressure sensor with high pressure sensitivity and short response time and that it can be inexpensively fabricated over large areas. Furthermore, the paper-based pressure sensors are integrated into a fully functional 3D touch-pad device, which is a step toward the realization of omnipresent electronics. © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
A Micro-Resonant Gas Sensor with Nanometer Clearance between the Pole Plates
Xu, Lizhong
2018-01-01
In micro-resonant gas sensors, the capacitive detection is widely used because of its simple structure. However, its shortcoming is a weak signal output caused by a small capacitance change. Here, we reduced the initial clearance between the pole plates to the nanometer level, and increased the capacitance between the pole plates and its change during resonator vibration. We propose a fabricating process of the micro-resonant gas sensor by which the initial clearance between the pole plates is reduced to the nanometer level and a micro-resonant gas sensor with 200 nm initial clearance is fabricated. With this sensor, the resonant frequency shifts were measured when they were exposed to several different vapors, and high detection accuracies were obtained. The detection accuracy with respect to ethanol vapor was 0.4 ppm per Hz shift, and the detection accuracy with respect to hydrogen and ammonias vapors was 3 ppm and 0.5 ppm per Hz shift, respectively. PMID:29373546
A Micro-Resonant Gas Sensor with Nanometer Clearance between the Pole Plates.
Fu, Xiaorui; Xu, Lizhong
2018-01-26
In micro-resonant gas sensors, the capacitive detection is widely used because of its simple structure. However, its shortcoming is a weak signal output caused by a small capacitance change. Here, we reduced the initial clearance between the pole plates to the nanometer level, and increased the capacitance between the pole plates and its change during resonator vibration. We propose a fabricating process of the micro-resonant gas sensor by which the initial clearance between the pole plates is reduced to the nanometer level and a micro-resonant gas sensor with 200 nm initial clearance is fabricated. With this sensor, the resonant frequency shifts were measured when they were exposed to several different vapors, and high detection accuracies were obtained. The detection accuracy with respect to ethanol vapor was 0.4 ppm per Hz shift, and the detection accuracy with respect to hydrogen and ammonias vapors was 3 ppm and 0.5 ppm per Hz shift, respectively.
Ultrahigh Temperature Capacitive Pressure Sensor
NASA Technical Reports Server (NTRS)
Harsh, Kevin
2014-01-01
Robust, miniaturized sensing systems are needed to improve performance, increase efficiency, and track system health status and failure modes of advanced propulsion systems. Because microsensors must operate in extremely harsh environments, there are many technical challenges involved in developing reliable systems. In addition to high temperatures and pressures, sensing systems are exposed to oxidation, corrosion, thermal shock, fatigue, fouling, and abrasive wear. In these harsh conditions, sensors must be able to withstand high flow rates, vibration, jet fuel, and exhaust. In order for existing and future aeropropulsion turbine engines to improve safety and reduce cost and emissions while controlling engine instabilities, more accurate and complete sensor information is necessary. High-temperature (300 to 1,350 C) capacitive pressure sensors are of particular interest due to their high measurement bandwidth and inherent suitability for wireless readout schemes. The objective of this project is to develop a capacitive pressure sensor based on silicon carbon nitride (SiCN), a new class of high-temperature ceramic materials, which possesses excellent mechanical and electric properties at temperatures up to 1,600 C.
NASA Astrophysics Data System (ADS)
Mao, Mingxu; Ye, Jiamin; Wang, Haigang; Yang, Wuqiang
2016-09-01
The hydrodynamics of gas-solids flow in the bottom of a circulating fluidized bed (CFB) are complicated. Three-dimensional (3D) electrical capacitance tomography (ECT) has been used to investigate the hydrodynamics in risers of different shapes. Four different ECT sensors with 12 electrodes each are designed according to the dimension of risers, including two circular ECT sensors, a square ECT sensor and a rectangular ECT sensor. The electrodes are evenly arranged in three planes to obtain capacitance in different heights and to reconstruct the 3D images by linear back projection (LBP) algorithm. Experiments were carried out on the four risers using sands as the solids material. The capacitance and differential pressure are measured under the gas superficial velocity from 0.6 m s-1 to 3.0 m s-1 with a step of 0.2 m s-1. The flow regime is investigated according to the solids concentration and differential pressure. The dynamic property of bubbling flows is analyzed theoretically and the performance of the 3D ECT sensors is evaluated. The experimental results show that 3D ECT can be used in the CFB with different risers to predict the hydrodynamics of gas-solids bubbling flows.
A magneto-sensitive skin for robots in space
NASA Technical Reports Server (NTRS)
Chauhan, D. S.; Dehoff, P. H.
1991-01-01
The development of a robot arm proximity sensing skin that can sense intruding objects is described. The purpose of the sensor would be to prevent the robot from colliding with objects in space including human beings. Eventually a tri-mode system in envisioned including proximity, tactile, and thermal. To date the primary emphasis was on the proximity sensor which evolved from one based on magneto-inductive principles to the current design which is based on a capacitive-reflector system. The capacitive sensing element, backed by a reflector driven at the same voltage and in phase with the sensor, is used to reflect field lines away from the grounded robot toward the intruding object. This results in an increased sensing range of up to 12 in. with the reflector on compared with only 1 in. with it off. It is believed that this design advances the state-of-the-art in capacitive sensor performance.
Kim, Kihong; Song, Giyoung; Park, Cheolmin; Yun, Kwang-Seok
2017-01-01
This paper presents a power-generating sensor array in a flexible and stretchable form. The proposed device is composed of resistive strain sensors, capacitive tactile sensors, and a triboelectric energy harvester in a single platform. The device is implemented in a woven textile structure by using proposed functional threads. A single functional thread is composed of a flexible hollow tube coated with silver nanowires on the outer surface and a conductive silver thread inside the tube. The total size of the device is 60 × 60 mm2 having a 5 × 5 array of sensor cell. The touch force in the vertical direction can be sensed by measuring the capacitance between the warp and weft functional threads. In addition, because silver nanowire layers provide piezoresistivity, the strain applied in the lateral direction can be detected by measuring the resistance of each thread. Last, with regard to the energy harvester, the maximum power and power density were measured as 201 μW and 0.48 W/m2, respectively, when the device was pushed in the vertical direction. PMID:29120363
An Electromagnetic/Capacitive Composite Sensor for Testing of Thermal Barrier Coatings
Ren, Yuan; Pan, Mengchun; Chen, Dixiang; Tian, Wugang
2018-01-01
Thermal barrier coatings (TBCs) can significantly reduce the operating temperature of the aeroengine turbine blade substrate, and their testing technology is very urgently demanded. Due to their complex multi-layer structure, it is hard to evaluate TBCs with a single function sensor. In this paper, an electromagnetic/capacitive composite sensor is proposed for the testing of thermal barrier coatings. The dielectric material is tested with planar capacitor, and the metallic material is tested with electromagnetic coils. Then, the comprehensive test and evaluation of thermal barrier coating system can be realized. The sensor is optimized by means of theoretical and simulation analysis, and the interaction between the planar capacitor and the electromagnetic coil is studied. The experimental system is built based on an impedance analyser and multiplex unit to evaluate the performance of the composite sensor. The transimpedances and capacitances are measured under different coating parameters, such as thickness and permittivity of top coating as well as bond layer conductivity. The experimental results agree with the simulation analysis, and the feasibility of the sensor is proved. PMID:29783746
Alhoshany, Abdulaziz; Sivashankar, Shilpa; Mashraei, Yousof; Omran, Hesham; Salama, Khaled N
2017-08-23
This paper presents a biosensor-CMOS platform for measuring the capacitive coupling of biorecognition elements. The biosensor is designed, fabricated, and tested for the detection and quantification of a protein that reveals the presence of early-stage cancer. For the first time, the spermidine/spermine N1 acetyltransferase (SSAT) enzyme has been screened and quantified on the surface of a capacitive sensor. The sensor surface is treated to immobilize antibodies, and the baseline capacitance of the biosensor is reduced by connecting an array of capacitors in series for fixed exposure area to the analyte. A large sensing area with small baseline capacitance is implemented to achieve a high sensitivity to SSAT enzyme concentrations. The sensed capacitance value is digitized by using a 12-bit highly digital successive-approximation capacitance-to-digital converter that is implemented in a 0.18 μm CMOS technology. The readout circuit operates in the near-subthreshold regime and provides power and area efficient operation. The capacitance range is 16.137 pF with a 4.5 fF absolute resolution, which adequately covers the concentrations of 10 mg/L, 5 mg/L, 2.5 mg/L, and 1.25 mg/L of the SSAT enzyme. The concentrations were selected as a pilot study, and the platform was shown to demonstrate high sensitivity for SSAT enzymes on the surface of the capacitive sensor. The tested prototype demonstrated 42.5 μS of measurement time and a total power consumption of 2.1 μW.
Alhoshany, Abdulaziz; Sivashankar, Shilpa; Mashraei, Yousof; Omran, Hesham; Salama, Khaled N.
2017-01-01
This paper presents a biosensor-CMOS platform for measuring the capacitive coupling of biorecognition elements. The biosensor is designed, fabricated, and tested for the detection and quantification of a protein that reveals the presence of early-stage cancer. For the first time, the spermidine/spermine N1 acetyltransferase (SSAT) enzyme has been screened and quantified on the surface of a capacitive sensor. The sensor surface is treated to immobilize antibodies, and the baseline capacitance of the biosensor is reduced by connecting an array of capacitors in series for fixed exposure area to the analyte. A large sensing area with small baseline capacitance is implemented to achieve a high sensitivity to SSAT enzyme concentrations. The sensed capacitance value is digitized by using a 12-bit highly digital successive-approximation capacitance-to-digital converter that is implemented in a 0.18 μm CMOS technology. The readout circuit operates in the near-subthreshold regime and provides power and area efficient operation. The capacitance range is 16.137 pF with a 4.5 fF absolute resolution, which adequately covers the concentrations of 10 mg/L, 5 mg/L, 2.5 mg/L, and 1.25 mg/L of the SSAT enzyme. The concentrations were selected as a pilot study, and the platform was shown to demonstrate high sensitivity for SSAT enzymes on the surface of the capacitive sensor. The tested prototype demonstrated 42.5 μS of measurement time and a total power consumption of 2.1 μW. PMID:28832523
Gaseous slip flow analysis of a micromachined flow sensor for ultra small flow applications
NASA Astrophysics Data System (ADS)
Jang, Jaesung; Wereley, Steven T.
2007-02-01
The velocity slip of a fluid at a wall is one of the most typical phenomena in microscale gas flows. This paper presents a flow analysis considering the velocity slip in a capacitive micro gas flow sensor based on pressure difference measurements along a microchannel. The tangential momentum accommodation coefficient (TMAC) measurements of a particular channel wall in planar microchannels will be presented while the previous micro gas flow studies have been based on the same TMACs on both walls. The sensors consist of a pair of capacitive pressure sensors, inlet/outlet and a microchannel. The main microchannel is 128.0 µm wide, 4.64 µm deep and 5680 µm long, and operated under nearly atmospheric conditions where the outlet Knudsen number is 0.0137. The sensor was fabricated using silicon wet etching, ultrasonic drilling, deep reactive ion etching (DRIE) and anodic bonding. The capacitance change of the sensor and the mass flow rate of nitrogen were measured as the inlet-to-outlet pressure ratio was varied from 1.00 to 1.24. The measured maximum mass flow rate was 3.86 × 10-10 kg s-1 (0.019 sccm) at the highest pressure ratio tested. As the pressure difference increased, both the capacitance of the differential pressure sensor and the flow rate through the main microchannel increased. The laminar friction constant f sdot Re, an important consideration in sensor design, varied from the incompressible no-slip case and the mass sensitivity and resolution of this sensor were discussed. Using the current slip flow formulae, a microchannel with much smaller mass flow rates can be designed at the same pressure ratios.
Calibration of micro-capacitance measurement system for thermal barrier coating testing
NASA Astrophysics Data System (ADS)
Ren, Yuan; Chen, Dixiang; Wan, Chengbiao; Tian, Wugang; Pan, Mengchun
2018-06-01
In order to comprehensively evaluate the thermal barrier coating system of an engine blade, an integrated planar sensor combining electromagnetic coils with planar capacitors is designed, in which the capacitance measurement accuracy of the planar capacitor is a key factor. The micro-capacitance measurement system is built based on an impedance analyzer. Because of the influence of non-ideal factors on the measuring system, there is an obvious difference between the measured value and the actual value. It is necessary to calibrate the measured results and eliminate the difference. In this paper, the measurement model of a planar capacitive sensor is established, and the relationship between the measured value and the actual value of capacitance is deduced. The model parameters are estimated with the least square method, and the calibration accuracy is evaluated with experiments under different dielectric conditions. The capacitance measurement error is reduced from 29% ˜ 46.5% to around 1% after calibration, which verifies the feasibility of the calibration method.
Ultrananocrystalline Diamond Cantilever Wide Dynamic Range Acceleration/Vibration /Pressure Sensor
Krauss, Alan R.; Gruen, Dieter M.; Pellin, Michael J.; Auciello, Orlando
2003-09-02
An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/V2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.
Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor
Krauss, Alan R [Naperville, IL; Gruen, Dieter M [Downers Grove, IL; Pellin, Michael J [Naperville, IL; Auciello, Orlando [Bolingbrook, IL
2002-07-23
An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/N2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.
Three dimensional stress vector sensor array and method therefor
Pfeifer, Kent Bryant; Rudnick, Thomas Jeffery
2005-07-05
A sensor array is configured based upon capacitive sensor techniques to measure stresses at various positions in a sheet simultaneously and allow a stress map to be obtained in near real-time. The device consists of single capacitive elements applied in a one or two dimensional array to measure the distribution of stresses across a mat surface in real-time as a function of position for manufacturing and test applications. In-plane and normal stresses in rolling bodies such as tires may thus be monitored.
Lai, Wei-An; Lin, Chih-Heng; Yang, Yuh-Shyong; Lu, Michael S-C
2012-05-15
This work presents miniaturized CMOS (complementary metal oxide semiconductor) sensors for non-faradic impedimetric detection of AIV (avian influenza virus) oligonucleotides. The signal-to-noise ratio is significantly improved by monolithic sensor integration to reduce the effect of parasitic capacitances. The use of sub-μm interdigitated microelectrodes is also beneficial for promoting the signal coupling efficiency. Capacitance changes associated with surface modification, functionalization, and DNA hybridization were extracted from the measured frequency responses based on an equivalent-circuit model. Hybridization of the AIV H5 capture and target DNA probes produced a capacitance reduction of -13.2 ± 2.1% for target DNA concentrations from 1 fM to 10 fM, while a capacitance increase was observed when H5 target DNA was replaced with non-complementary H7 target DNA. With the demonstrated superior sensing capabilities, this miniaturized CMOS sensing platform shows great potential for label-free point-of-care biosensing applications. Copyright © 2012 Elsevier B.V. All rights reserved.
NASA Astrophysics Data System (ADS)
Li, Chunyan; Wu, Pei-Ming; Shutter, Lori A.; Narayan, Raj K.
2010-02-01
The dual-mode operation of a polyvinylidene fluoride trifluoroethylene (PVDF-TrFE) piezoelectric polymer diaphragm, in a capacitive or resonant mode, is reported as a flexible intracranial pressure (ICP) sensor. The pressure sensor using a capacitive mode exhibits a higher linearity and less power consumption than resonant mode operated pressure sensor. In contrast, the latter provides better sensitivity and easier adaption for wireless application. The metrological properties of the dual-mode ICP sensor being described are satisfactory in vitro. We propose that the piezoelectric polymer diaphragm has a promising future in intracranial pressure monitoring.
Humidity effect on organic semiconductor NiPc films deposited at different gravity conditions
NASA Astrophysics Data System (ADS)
Fatima, N.; Ahmed, M. M.; Karimov, Kh. S.; Ahmedov, Kh.
2016-08-01
In this study, thin films of Nickel Phthalocyanine (NiPc) were deposited by centrifugation at high gravity (70g), and also at normal gravity (1g) conditions to fabricate humidity sensors. Ceramic alumina sheet, coated with silver electrodes, having interelectrode distance of 0.2l mm were used to assess the electrical properties of the sensors. Room temperature capacitance and impedance variations were measured as a function of relative humidity ranging from 25% ∼⃒ 95% at 1 kHz frequency. It was observed that sensors fabricated at 70g were more sensitive compared to sensors fabricated at 1g. Sensors fabricated at 70g exhibited 1.8 times decrease in their impedance and1.5 times increase in their capacitance at peak ambient humidity. SEM images showed more roughness for the films deposited at 70g compared to films deposited at 1g. It was assumed that surface irregularities might have increased active surface area of 70g sensors hence changed the electrical response. Impedance-humidity and capacitance-humidity relationships were modeled and a good agreement was observed between experimental and modeled data. Experimental data showed that NiPc films could be useful for instrumentation industry to fabricate organic humidity sensors.
Chiou, Jin-Chern; Hsu, Shun-Hsi; Huang, Yu-Chieh; Yeh, Guan-Ting; Liou, Wei-Ting; Kuei, Cheng-Kai
2017-01-01
This study presented a wireless smart contact lens system that was composed of a reconfigurable capacitive sensor interface circuitry and wirelessly powered radio-frequency identification (RFID) addressable system for sensor control and data communication. In order to improve compliance and reduce user discomfort, a capacitive sensor was embedded on a soft contact lens of 200 μm thickness using commercially available bio-compatible lens material and a standard manufacturing process. The results indicated that the reconfigurable sensor interface achieved sensitivity and baseline tuning up to 120 pF while consuming only 110 μW power. The range and sensitivity tuning of the readout circuitry ensured a reliable operation with respect to sensor fabrication variations and independent calibration of the sensor baseline for individuals. The on-chip voltage scaling allowed the further extension of the detection range and prevented the implementation of large on-chip elements. The on-lens system enabled the detection of capacitive variation caused by pressure changes in the range of 2.25 to 30 mmHg and hydration level variation from a distance of 1 cm using incident power from an RFID reader at 26.5 dBm. PMID:28067859
DOE Office of Scientific and Technical Information (OSTI.GOV)
Pan, Pengmin; McDonald, Timothy; Fulton, John
An 8-electrode capacitance tomography (ECT) sensor was built and used to measure moisture content (MC) and mass flow of pine chip flows. The device was capable of directly measuring total water quantity in a sample but was sensitive to both dry matter and moisture, and therefore required a second measurement of mass flow to calculate MC. Two means of calculating the mass flow were used: the first being an impact sensor to measure total mass flow, and the second a volumetric approach based on measuring total area occupied by wood in images generated using the capacitance sensor’s tomographic mode. Testsmore » were made on 109 groups of wood chips ranging in moisture content from 14% to 120% (dry basis) and wet weight of 280 to 1100 g. Sixty groups were randomly selected as a calibration set, and the remaining were used for validation of the sensor’s performance. For the combined capacitance/force transducer system, root mean square errors of prediction (RMSEP) for wet mass flow and moisture content were 13.42% and 16.61%, respectively. RMSEP using the combined volumetric mass flow/capacitance sensor for dry mass flow and moisture content were 22.89% and 24.16%, respectively. Either of the approaches was concluded to be feasible for prediction of moisture content in pine chip flows, but combining the impact and capacitance sensors was easier to implement. As a result, in situations where flows could not be impeded, however, the tomographic approach would likely be more useful.« less
Pan, Pengmin; McDonald, Timothy; Fulton, John; ...
2016-12-23
An 8-electrode capacitance tomography (ECT) sensor was built and used to measure moisture content (MC) and mass flow of pine chip flows. The device was capable of directly measuring total water quantity in a sample but was sensitive to both dry matter and moisture, and therefore required a second measurement of mass flow to calculate MC. Two means of calculating the mass flow were used: the first being an impact sensor to measure total mass flow, and the second a volumetric approach based on measuring total area occupied by wood in images generated using the capacitance sensor’s tomographic mode. Testsmore » were made on 109 groups of wood chips ranging in moisture content from 14% to 120% (dry basis) and wet weight of 280 to 1100 g. Sixty groups were randomly selected as a calibration set, and the remaining were used for validation of the sensor’s performance. For the combined capacitance/force transducer system, root mean square errors of prediction (RMSEP) for wet mass flow and moisture content were 13.42% and 16.61%, respectively. RMSEP using the combined volumetric mass flow/capacitance sensor for dry mass flow and moisture content were 22.89% and 24.16%, respectively. Either of the approaches was concluded to be feasible for prediction of moisture content in pine chip flows, but combining the impact and capacitance sensors was easier to implement. As a result, in situations where flows could not be impeded, however, the tomographic approach would likely be more useful.« less
Pan, Pengmin; McDonald, Timothy; Fulton, John; Via, Brian; Hung, John
2016-01-01
An 8-electrode capacitance tomography (ECT) sensor was built and used to measure moisture content (MC) and mass flow of pine chip flows. The device was capable of directly measuring total water quantity in a sample but was sensitive to both dry matter and moisture, and therefore required a second measurement of mass flow to calculate MC. Two means of calculating the mass flow were used: the first being an impact sensor to measure total mass flow, and the second a volumetric approach based on measuring total area occupied by wood in images generated using the capacitance sensor’s tomographic mode. Tests were made on 109 groups of wood chips ranging in moisture content from 14% to 120% (dry basis) and wet weight of 280 to 1100 g. Sixty groups were randomly selected as a calibration set, and the remaining were used for validation of the sensor’s performance. For the combined capacitance/force transducer system, root mean square errors of prediction (RMSEP) for wet mass flow and moisture content were 13.42% and 16.61%, respectively. RMSEP using the combined volumetric mass flow/capacitance sensor for dry mass flow and moisture content were 22.89% and 24.16%, respectively. Either of the approaches was concluded to be feasible for prediction of moisture content in pine chip flows, but combining the impact and capacitance sensors was easier to implement. In situations where flows could not be impeded, however, the tomographic approach would likely be more useful. PMID:28025536
Silicon micromachined accelerometer/seismometer and method of making the same
NASA Technical Reports Server (NTRS)
Martin, Richard D. (Inventor); Pike, W. Thomas (Inventor)
2001-01-01
A silicon-based microaccelerometer for seismic application is provided using a low-resonant frequency (10 Hz), large proof mass (1 gram), and high Q suspension to achieve high sensitivity of less than 1 ng with a bandwidth a 0.05 to 50 Hz. The proof mass is cut away from a planar substrate in the form of a disk using abrasive cutting, which disk closely fits but does not touch a surrounding angular frame. The spring of the microaccelerometer between the angular frame and the proof mass is provided from two continuous, 3 microns thick membranes. The fixed capacitive electrodes are provided on separate, subsequently bonded substrates, and movable capacitive plates are provided on the membranes. By fabricating capacitive plates on the separate substrates, the gap between the fixed and movable capacitive plates in the differential capacitive sensor is closely controlled. The use of continuous membranes for the spring produces a shock resistant, robust sensor.
Mapping Capacitive Coupling Among Pixels in a Sensor Array
NASA Technical Reports Server (NTRS)
Seshadri, Suresh; Cole, David M.; Smith, Roger M.
2010-01-01
An improved method of mapping the capacitive contribution to cross-talk among pixels in an imaging array of sensors (typically, an imaging photodetector array) has been devised for use in calibrating and/or characterizing such an array. The method involves a sequence of resets of subarrays of pixels to specified voltages and measurement of the voltage responses of neighboring non-reset pixels.
Capacitive pressure-sensitive composites using nickel-silicone rubber: experiments and modeling
NASA Astrophysics Data System (ADS)
Fan, Yuqin; Liao, Changrong; Liao, Ganliang; Tan, Renbing; Xie, Lei
2017-07-01
Capacitive pressure (i.e., piezo-capacitive) sensors have manifested their superiority as a potential electronic skin. The mechanism of the traditional piezo-capacitive sensors is mainly to change the relative permittivity of the flexible composites by compressing the specially fabricated microstructures in the polymer matrix under pressure. Instead, we study the piezo-capacitive effect for a newly reported isotropic flexible composite consisting of silicone rubber (SR) and uniformly dispersed micron-sized conductive nickel particles experimentally and theoretically. The Young’s modulus of the nickel-SR composites (NSRCs) is designed to meet that of human skin. Experimental results show that the NSRCs exhibit remarkable particle concentration dependent capacitance response under uniaxial pressure, and the NSRCs present a good repeatability. We propose a mathematical model at particle level to provide deep insights into the piezo-capacitive mechanism, by considering the adjacent particles in the axial direction as micro capacitors connected in series and in parallel on the horizontal plane. The piezo-capacitive effect is determined by the relative permittivity induced by the particles rearrangement, longitudinal interparticle gap, and deflection angle of micro particle capacitors under pressure. Specifically, the relative capacitance of NSRC capacitor is deduced to be product of two factors: the degree of particle rearrangement, and the relative capacitance of a micro capacitor with the average longitudinal gap. The proposed model well matches and interprets the experimental results.
Peng, Ping; Hao, Lifeng; Ding, Ning; Jiao, Weicheng; Wang, Qi; Zhang, Jian; Wang, Rongguo
2015-11-01
We presented a preamplifier design for quartz tuning fork (QTF) sensors in which the stray capacitance is digitally compensated. In this design, the manually controlled variable capacitor is replaced by a pair of varicap diodes, whose capacitance could be accurately tuned by a bias voltage. A tuning circuit including a single side low power operational amplifier, a digital-to-analog converter, and a microprocessor is also described, and the tuning process can be conveniently carried out on a personal computer. For the design, the noise level was investigated experimentally.
Novel designs for application specific MEMS pressure sensors.
Fragiacomo, Giulio; Reck, Kasper; Lorenzen, Lasse; Thomsen, Erik V
2010-01-01
In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsically immune to electromagnetic interference, with large pressure range (0-350 bar) and a sensitivity of 1 pm/bar is presented. Finally, a resonating wireless pressure sensor power source free with a sensitivity of 650 KHz/mmHg is described. These sensors will be related with their applications in harsh environment, distributed systems and medical environment, respectively. For many aspects, commercially available sensors, which in vast majority are piezoresistive, are not suited for the applications proposed.
NASA Astrophysics Data System (ADS)
Casas, Juan; Jelen, Dorota; Trikoupis, Nikolaos
2017-02-01
The monitoring of cryogenic facilities often require the measurement of pressure in the sub 5’000 Pa range that are used for flow metering applications, for saturated superfluid helium, etc. The pressure measurement is based on the minute displacement of a sensing diaphragm often through contactless techniques by using capacitive or inductive methods. The LHC radiation environment forbid the use of standard commercial sensors because of the embedded electronics that are affected both by radiation induced drift and transient Single Event Effects (SEE). Passive pressure sensors from two manufacturers were investigated and a CERN designed radiation-tolerant electronics has been developed for measuring variable-reluctance sensors. During the last maintenance stop of the LHC accelerator, four absolute pressure sensors were installed in some of the low pressure bayonet heat exchangers and four differential pressure sensors on the venturi flowmeters that monitor the cooling flow of the 20.5 kA current leads of the ATLAS end-cap superconducting toroids. The pressure sensors operating range is about 1000 to 5000 Pa and the targeted uncertainty is +/- 50 Pa which would permit to measure the equivalent saturation temperature at 1.8 K within better than 0.01 K. This paper describes the radiation hard measuring head that is based on an inductive bridge, its associated radiation-tolerant electronics that is installed under the LHC superconducting magnets or the ATLAS detector cavern; and the first operational experience.
Characterization of pixel sensor designed in 180 nm SOI CMOS technology
NASA Astrophysics Data System (ADS)
Benka, T.; Havranek, M.; Hejtmanek, M.; Jakovenko, J.; Janoska, Z.; Marcisovska, M.; Marcisovsky, M.; Neue, G.; Tomasek, L.; Vrba, V.
2018-01-01
A new type of X-ray imaging Monolithic Active Pixel Sensor (MAPS), X-CHIP-02, was developed using a 180 nm deep submicron Silicon On Insulator (SOI) CMOS commercial technology. Two pixel matrices were integrated into the prototype chip, which differ by the pixel pitch of 50 μm and 100 μm. The X-CHIP-02 contains several test structures, which are useful for characterization of individual blocks. The sensitive part of the pixel integrated in the handle wafer is one of the key structures designed for testing. The purpose of this structure is to determine the capacitance of the sensitive part (diode in the MAPS pixel). The measured capacitance is 2.9 fF for 50 μm pixel pitch and 4.8 fF for 100 μm pixel pitch at -100 V (default operational voltage). This structure was used to measure the IV characteristics of the sensitive diode. In this work, we report on a circuit designed for precise determination of sensor capacitance and IV characteristics of both pixel types with respect to X-ray irradiation. The motivation for measurement of the sensor capacitance was its importance for the design of front-end amplifier circuits. The design of pixel elements, as well as circuit simulation and laboratory measurement techniques are described. The experimental results are of great importance for further development of MAPS sensors in this technology.
Assen, Ayalew H; Yassine, Omar; Shekhah, Osama; Eddaoudi, Mohamed; Salama, Khaled N
2017-09-22
This work reports on the fabrication and deployment of a select metal-organic framework (MOF) thin film as an advanced chemical capacitive sensor for the sensing/detection of ammonia (NH 3 ) at room temperature. Namely, the MOF thin film sensing layer consists of a rare-earth (RE) MOF (RE-fcu-MOF) deposited on a capacitive interdigitated electrode (IDE). Purposely, the chemically stable naphthalene-based RE-fcu-MOF (NDC-Y-fcu-MOF) was elected and prepared/arranged as a thin film on a prefunctionalized capacitive IDE via the solvothermal growth method. Unlike earlier realizations, the fabricated MOF-based sensor showed a notable detection sensitivity for NH 3 at concentrations down to 1 ppm, with a detection limit appraised to be around 100 ppb (at room temperature) even in the presence of humidity and/or CO 2 . Distinctly, the NDC-Y-fcu-MOF based sensor exhibited the required stability to NH 3 , in contrast to other reported MOFs, and a remarkable detection selectivity toward NH 3 vs CH 4 , NO 2 , H 2 , and C 7 H 8 . The NDC-Y-fcu-MOF based sensor exhibited excellent performance for sensing ammonia for simulated breathing system in the presence of the mixture of carbon dioxide and/or humidity (water vapor), with no major alteration in the detection signal.
Dealing with the Effects of Sensor Displacement in Wearable Activity Recognition
Banos, Oresti; Toth, Mate Attila; Damas, Miguel; Pomares, Hector; Rojas, Ignacio
2014-01-01
Most wearable activity recognition systems assume a predefined sensor deployment that remains unchanged during runtime. However, this assumption does not reflect real-life conditions. During the normal use of such systems, users may place the sensors in a position different from the predefined sensor placement. Also, sensors may move from their original location to a different one, due to a loose attachment. Activity recognition systems trained on activity patterns characteristic of a given sensor deployment may likely fail due to sensor displacements. In this work, we innovatively explore the effects of sensor displacement induced by both the intentional misplacement of sensors and self-placement by the user. The effects of sensor displacement are analyzed for standard activity recognition techniques, as well as for an alternate robust sensor fusion method proposed in a previous work. While classical recognition models show little tolerance to sensor displacement, the proposed method is proven to have notable capabilities to assimilate the changes introduced in the sensor position due to self-placement and provides considerable improvements for large misplacements. PMID:24915181
A novel source-drain follower for monolithic active pixel sensors
NASA Astrophysics Data System (ADS)
Gao, C.; Aglieri, G.; Hillemanns, H.; Huang, G.; Junique, A.; Keil, M.; Kim, D.; Kofarago, M.; Kugathasan, T.; Mager, M.; Marin Tobon, C. A.; Martinengo, P.; Mugnier, H.; Musa, L.; Lee, S.; Reidt, F.; Riedler, P.; Rousset, J.; Sielewicz, K. M.; Snoeys, W.; Sun, X.; Van Hoorne, J. W.; Yang, P.
2016-09-01
Monolithic active pixel sensors (MAPS) receive interest in tracking applications in high energy physics as they integrate sensor and readout electronics in one silicon die with potential for lower material budget and cost, and better performance. Source followers (SFs) are widely used for MAPS readout: they increase charge conversion gain 1/Ceff or decrease the effective sensing node capacitance Ceff because the follower action compensates part of the input capacitance. Charge conversion gain is critical for analog power consumption and therefore for material budget in tracking applications, and also has direct system impact. This paper presents a novel source-drain follower (SDF), where both source and drain follow the gate potential improving charge conversion gain. For the inner tracking system (ITS) upgrade of the ALICE experiment at CERN, low material budget is a primary requirement. The SDF circuit was studied as part of the effort to optimize the effective capacitance of the sensing node. The collection electrode, input transistor and routing metal all contribute to Ceff. Reverse sensor bias reduces the collection electrode capacitance. The novel SDF circuit eliminates the contribution of the input transistor to Ceff, reduces the routing contribution if additional shielding is introduced, provides a way to estimate the capacitance of the sensor itself, and has a voltage gain closer to unity than the standard SF. The SDF circuit has a somewhat larger area with a somewhat smaller bandwidth, but this is acceptable in most cases. A test chip, manufactured in a 180 nm CMOS image sensor process, implements small prototype pixel matrices in different flavors to compare the standard SF to the novel SF and to the novel SF with additional shielding. The effective sensing node capacitance was measured using a 55Fe source. Increasing reverse substrate bias from -1 V to -6 V reduces Ceff by 38% and the equivalent noise charge (ENC) by 22% for the standard SF. The SDF provides a further 9% improvement for Ceff and 25% for ENC. The SDF circuit with additional shielding provides 18% improvement for Ceff, and combined with -6 V reverse bias yields almost a factor 2.
CMOS-MEMS Chemiresistive and Chemicapacitive Chemical Sensor System
NASA Astrophysics Data System (ADS)
Lazarus, Nathan S.
Integrating chemical sensors with testing electronics is a powerful technique with the potential to lower power and cost and allow for lower system limits of detection. This thesis explores the possibility of creating an integrated sensor system intended to be embedded within respirator cartridges to notify the user that hazardous chemicals will soon leak into the face mask. For a chemical sensor designer, this application is particularly challenging due to the need for a very sensitive and cheap sensor that will be exposed to widely varying environmental conditions during use. An octanethiol-coated gold nanoparticle chemiresistor to detect industrial solvents is developed, focusing on characterizing the environmental stability and limits of detection of the sensor. Since the chemiresistor was found to be highly sensitive to water vapor, a series of highly sensitive humidity sensor topologies were developed, with sensitivities several times previous integrated capacitive humidity sensors achieved. Circuit techniques were then explored to reduce the humidity sensor limits of detection, including the analysis of noise, charge injection, jitter and clock feedthrough in a charge-based capacitance measurement (CBCM) circuit and the design of a low noise Colpitts LC oscillator. The characterization of high resistance gold nanoclusters for capacitive chemical sensing was also performed. In the final section, a preconcentrator, a heater element intended to release a brief concentrated pulse of analate, was developed and tested for the purposes of lowering the system limit of detection.
Lim, Lam Ghai; Pao, William K. S.; Hamid, Nor Hisham; Tang, Tong Boon
2016-01-01
A 360° twisted helical capacitance sensor was developed for holdup measurement in horizontal two-phase stratified flow. Instead of suppressing nonlinear response, the sensor was optimized in such a way that a ‘sine-like’ function was displayed on top of the linear function. This concept of design had been implemented and verified in both software and hardware. A good agreement was achieved between the finite element model of proposed design and the approximation model (pure sinusoidal function), with a maximum difference of ±1.2%. In addition, the design parameters of the sensor were analysed and investigated. It was found that the error in symmetry of the sinusoidal function could be minimized by adjusting the pitch of helix. The experiments of air-water and oil-water stratified flows were carried out and validated the sinusoidal relationship with a maximum difference of ±1.2% and ±1.3% for the range of water holdup from 0.15 to 0.85. The proposed design concept therefore may pose a promising alternative for the optimization of capacitance sensor design. PMID:27384567
Moore, James A.; Sparks, Dennis O.
1998-11-10
An RF sensor having a novel current sensing probe and a voltage sensing probe to measure voltage and current. The current sensor is disposed in a transmission line to link all of the flux generated by the flowing current in order to obtain an accurate measurement. The voltage sensor is a flat plate which operates as a capacitive plate to sense voltage on a center conductor of the transmission line, in which the measured voltage is obtained across a resistance leg of a R-C differentiator circuit formed by the characteristic impedance of a connecting transmission line and a capacitance of the plate, which is positioned proximal to the center conductor.
Spectral response analysis of PVDF capacitive sensors
NASA Astrophysics Data System (ADS)
Reyes-Ramírez, B.; García-Segundo, C.; García-Valenzuela, A.
2013-06-01
We investigate the spectral response to ultrasound waves in water of low-noise capacitive sensors based on PVDF polymer piezoelectric films. First, we analyze theoretically the mechanical-to-electrical transduction as a function of the frequency of ultrasonic signals and derive an analytic expression of the sensor's transfer function. Then we present experimental results of the frequency response of a home-made PDVF in water to test signals from 1 to 20 MHz induced by a commercial hydrophone powered by a signal generator and compare with our theoretical model.
NASA Astrophysics Data System (ADS)
Hyun Jo, Dong; Lee, Rimi; Hyoung Kim, Jin; Oh Jun, Hyoung; Geol Lee, Tae; Hun Kim, Jeong
2015-06-01
Vascular integrity is important in maintaining homeostasis of brain microenvironments. In various brain diseases including Alzheimer’s disease, stroke, and multiple sclerosis, increased paracellular permeability due to breakdown of blood-brain barrier is linked with initiation and progression of pathological conditions. We developed a capacitance sensor array to monitor dielectric responses of cerebral endothelial cell monolayer, which could be utilized to evaluate the integrity of brain microvasculature. Our system measured real-time capacitance values which demonstrated frequency- and time-dependent variations. With the measurement of capacitance at the frequency of 100 Hz, we could differentiate the effects of vascular endothelial growth factor (VEGF), a representative permeability-inducing factor, on endothelial cells and quantitatively analyse the normalized values. Interestingly, we showed differential capacitance values according to the status of endothelial cell monolayer, confluent or sparse, evidencing that the integrity of monolayer was associated with capacitance values. Another notable feature was that we could evaluate the expression of molecules in samples in our system with the reference of real-time capacitance values. We suggest that this dielectric spectroscopy system could be successfully implanted as a novel in vitro assay in the investigation of the roles of paracellular permeability in various brain diseases.
Wen, Yintang; Zhang, Zhenda; Zhang, Yuyan; Sun, Dongtao
2017-01-01
A coplanar electrode array sensor is established for the imaging of composite-material adhesive-layer defect detection. The sensor is based on the capacitive edge effect, which leads to capacitance data being considerably weak and susceptible to environmental noise. The inverse problem of coplanar array electrical capacitance tomography (C-ECT) is ill-conditioning, in which a small error of capacitance data can seriously affect the quality of reconstructed images. In order to achieve a stable image reconstruction process, a redundancy analysis method for capacitance data is proposed. The proposed method is based on contribution rate and anti-interference capability. According to the redundancy analysis, the capacitance data are divided into valid and invalid data. When the image is reconstructed by valid data, the sensitivity matrix needs to be changed accordingly. In order to evaluate the effectiveness of the sensitivity map, singular value decomposition (SVD) is used. Finally, the two-dimensional (2D) and three-dimensional (3D) images are reconstructed by the Tikhonov regularization method. Through comparison of the reconstructed images of raw capacitance data, the stability of the image reconstruction process can be improved, and the quality of reconstructed images is not degraded. As a result, much invalid data are not collected, and the data acquisition time can also be reduced. PMID:29295537
An oil fraction neural sensor developed using electrical capacitance tomography sensor data.
Zainal-Mokhtar, Khursiah; Mohamad-Saleh, Junita
2013-08-26
This paper presents novel research on the development of a generic intelligent oil fraction sensor based on Electrical Capacitance Tomography (ECT) data. An artificial Neural Network (ANN) has been employed as the intelligent system to sense and estimate oil fractions from the cross-sections of two-component flows comprising oil and gas in a pipeline. Previous works only focused on estimating the oil fraction in the pipeline based on fixed ECT sensor parameters. With fixed ECT design sensors, an oil fraction neural sensor can be trained to deal with ECT data based on the particular sensor parameters, hence the neural sensor is not generic. This work focuses on development of a generic neural oil fraction sensor based on training a Multi-Layer Perceptron (MLP) ANN with various ECT sensor parameters. On average, the proposed oil fraction neural sensor has shown to be able to give a mean absolute error of 3.05% for various ECT sensor sizes.
An Oil Fraction Neural Sensor Developed Using Electrical capacitance Tomography Sensor Data
Zainal-Mokhtar, Khursiah; Mohamad-Saleh, Junita
2013-01-01
This paper presents novel research on the development of a generic intelligent oil fraction sensor based on Electrical capacitance Tomography (ECT) data. An artificial Neural Network (ANN) has been employed as the intelligent system to sense and estimate oil fractions from the cross-sections of two-component flows comprising oil and gas in a pipeline. Previous works only focused on estimating the oil fraction in the pipeline based on fixed ECT sensor parameters. With fixed ECT design sensors, an oil fraction neural sensor can be trained to deal with ECT data based on the particular sensor parameters, hence the neural sensor is not generic. This work focuses on development of a generic neural oil fraction sensor based on training a Multi-Layer Perceptron (MLP) ANN with various ECT sensor parameters. On average, the proposed oil fraction neural sensor has shown to be able to give a mean absolute error of 3.05% for various ECT sensor sizes. PMID:24064598
High resolution CMOS capacitance-frequency converter for biosensor applications
NASA Astrophysics Data System (ADS)
Ghoor, I. S.; Land, K.; Joubert, T.-H.
2016-02-01
This paper presents the design of a low-complexity, linear and sub-pF CMOS capacitance-frequency converter for reading out a capacitive bacterial bio/sensors with the endeavour of creating a universal bio/sensor readout module. Therefore the priority design objectives are a high resolution as well as an extensive dynamic range. The circuit is based on a method which outputs a digital frequency signal directly from a differential capacitance by the accumulation of charges produced by repetitive charge integration and charge preservation1. A prototype has been designed for manufacture in the 0.35 μm, 3.3V ams CMOS technology. At a 1MHz clock speed, the most pertinent results obtained for the designed converter are: (i) power consumption of 1.37mW; (ii) a resolution of at least 5 fF for sensitive capacitive transduction; and (iii) an input dynamic range of at least 43.5 dB from a measurable capacitance value range of 5 - 750 fF (iv) and a Pearson's coefficient of linearity of 0.99.
Halonen, Niina; Kilpijärvi, Joni; Sobocinski, Maciej; Datta-Chaudhuri, Timir; Hassinen, Antti; Prakash, Someshekar B; Möller, Peter; Abshire, Pamela; Kellokumpu, Sakari; Lloyd Spetz, Anita
2016-01-01
Cell viability monitoring is an important part of biosafety evaluation for the detection of toxic effects on cells caused by nanomaterials, preferably by label-free, noninvasive, fast, and cost effective methods. These requirements can be met by monitoring cell viability with a capacitance-sensing integrated circuit (IC) microchip. The capacitance provides a measurement of the surface attachment of adherent cells as an indication of their health status. However, the moist, warm, and corrosive biological environment requires reliable packaging of the sensor chip. In this work, a second generation of low temperature co-fired ceramic (LTCC) technology was combined with flip-chip bonding to provide a durable package compatible with cell culture. The LTCC-packaged sensor chip was integrated with a printed circuit board, data acquisition device, and measurement-controlling software. The packaged sensor chip functioned well in the presence of cell medium and cells, with output voltages depending on the medium above the capacitors. Moreover, the manufacturing of microfluidic channels in the LTCC package was demonstrated.
Touch-mode capacitive pressure sensor with graphene-polymer heterostructure membrane
NASA Astrophysics Data System (ADS)
Berger, Christian; Phillips, Rory; Pasternak, Iwona; Sobieski, Jan; Strupinski, Wlodek; Vijayaraghavan, Aravind
2018-01-01
We describe the fabrication and characterisation of a touch-mode capacitive pressure sensor (TMCPS) with a robust design that comprises a graphene-polymer heterostructure film, laminated onto the silicon dioxide surface of a silicon wafer, incorporating a SU-8 spacer grid structure. The spacer grid structure allows the flexible graphene-polymer film to be partially suspended above the substrate, such that a pressure on the membrane results in a reproducible deflection, even after exposing the membrane to pressures over 10 times the operating range. Sensors show reproducible pressure transduction in water submersion at varying depths under static and dynamic loading. The measured capacitance change in response to pressure is in good agreement with an analytical model of clamped plates in touch mode. The device shows a pressure sensitivity of 27.1 +/- 0.5 fF Pa-1 over a pressure range of 0.5 kPa-8.5 kPa. In addition, we demonstrate the operation of this device as a force-touch sensor in air.
Non-contact capacitance based image sensing method and system
Novak, James L.; Wiczer, James J.
1995-01-01
A system and a method is provided for imaging desired surfaces of a workpiece. A sensor having first and second sensing electrodes which are electrically isolated from the workpiece is positioned above and in proximity to the desired surfaces of the workpiece. An electric field is developed between the first and second sensing electrodes of the sensor in response to input signals being applied thereto and capacitance signals are developed which are indicative of any disturbances in the electric field as a result of the workpiece. An image signal of the workpiece may be developed by processing the capacitance signals. The image signals may provide necessary control information to a machining device for machining the desired surfaces of the workpiece in processes such as deburring or chamfering. Also, the method and system may be used to image dimensions of weld pools on a workpiece and surfaces of glass vials. The sensor may include first and second preview sensors used to determine the feed rate of a workpiece with respect to the machining device.
Non-contact capacitance based image sensing method and system
Novak, James L.; Wiczer, James J.
1994-01-01
A system and a method for imaging desired surfaces of a workpiece. A sensor having first and second sensing electrodes which are electrically isolated from the workpiece is positioned above and in proximity to the desired surfaces of the workpiece. An electric field is developed between the first and second sensing electrodes of the sensor in response to input signals being applied thereto and capacitance signals are developed which are indicative of any disturbances in the electric field as a result of the workpiece. An image signal of the workpiece may be developed by processing the capacitance signals. The image signals may provide necessary control information to a machining device for machining the desired surfaces of the workpiece in processes such as deburring or chamfering. Also, the method and system may be used to image dimensions of weld pools on a workpiece and surfaces of glass vials. The sensor may include first and second preview sensors used to determine the feed rate of a workpiece with respect to the machining device.
Novel Designs for Application Specific MEMS Pressure Sensors
Fragiacomo, Giulio; Reck, Kasper; Lorenzen, Lasse; Thomsen, Erik V.
2010-01-01
In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsically immune to electromagnetic interference, with large pressure range (0–350 bar) and a sensitivity of 1 pm/bar is presented. Finally, a resonating wireless pressure sensor power source free with a sensitivity of 650 KHz/mmHg is described. These sensors will be related with their applications in harsh environment, distributed systems and medical environment, respectively. For many aspects, commercially available sensors, which in vast majority are piezoresistive, are not suited for the applications proposed. PMID:22163425
NASA Astrophysics Data System (ADS)
Kumar, Lokesh; Kumar, Shailesh; Khan, S. A.; Islam, Tariqul
2012-10-01
A moisture sensor was fabricated based on porous thin film of γ-Al2O3 formed between the parallel gold electrodes. The sensor works on capacitive technique. The sensing film was fabricated by dipcoating of aluminium hydroxide sol solution obtained from the sol-gel method. The porous structure of the film of γ-Al2O3 phase was obtained by sintering the film at 450 °C for 1 h. The electrical parameters of the sensor have been determined by Agilent 4294A impedance analyzer. The sensor so obtained is found to be sensitive in moisture range 100-600 ppmV. The response time of the sensor in ppmV range moisture is very low ~ 24 s and recovery time is ~ 37 s.
Differential wide temperature range CMOS interface circuit for capacitive MEMS pressure sensors.
Wang, Yucai; Chodavarapu, Vamsy P
2015-02-12
We describe a Complementary Metal-Oxide Semiconductor (CMOS) differential interface circuit for capacitive Micro-Electro-Mechanical Systems (MEMS) pressure sensors that is functional over a wide temperature range between -55 °C and 225 °C. The circuit is implemented using IBM 0.13 μm CMOS technology with 2.5 V power supply. A constant-gm biasing technique is used to mitigate performance degradation at high temperatures. The circuit offers the flexibility to interface with MEMS sensors with a wide range of the steady-state capacitance values from 0.5 pF to 10 pF. Simulation results show that the circuitry has excellent linearity and stability over the wide temperature range. Experimental results confirm that the temperature effects on the circuitry are small, with an overall linearity error around 2%.
Differential Wide Temperature Range CMOS Interface Circuit for Capacitive MEMS Pressure Sensors
Wang, Yucai; Chodavarapu, Vamsy P.
2015-01-01
We describe a Complementary Metal-Oxide Semiconductor (CMOS) differential interface circuit for capacitive Micro-Electro-Mechanical Systems (MEMS) pressure sensors that is functional over a wide temperature range between −55 °C and 225 °C. The circuit is implemented using IBM 0.13 μm CMOS technology with 2.5 V power supply. A constant-gm biasing technique is used to mitigate performance degradation at high temperatures. The circuit offers the flexibility to interface with MEMS sensors with a wide range of the steady-state capacitance values from 0.5 pF to 10 pF. Simulation results show that the circuitry has excellent linearity and stability over the wide temperature range. Experimental results confirm that the temperature effects on the circuitry are small, with an overall linearity error around 2%. PMID:25686312
Sol-gel zinc oxide humidity sensors integrated with a ring oscillator circuit on-a-chip.
Yang, Ming-Zhi; Dai, Ching-Liang; Wu, Chyan-Chyi
2014-10-28
The study develops an integrated humidity microsensor fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated humidity sensor consists of a humidity sensor and a ring oscillator circuit on-a-chip. The humidity sensor is composed of a sensitive film and branch interdigitated electrodes. The sensitive film is zinc oxide prepared by sol-gel method. After completion of the CMOS process, the sensor requires a post-process to remove the sacrificial oxide layer and to coat the zinc oxide film on the interdigitated electrodes. The capacitance of the sensor changes when the sensitive film adsorbs water vapor. The circuit is used to convert the capacitance of the humidity sensor into the oscillation frequency output. Experimental results show that the output frequency of the sensor changes from 84.3 to 73.4 MHz at 30 °C as the humidity increases 40 to 90%RH.
In-Line Capacitance Sensor for Real-Time Water Absorption Measurements
NASA Technical Reports Server (NTRS)
Nurge, Mark A.; Perusich, Stephen A.
2010-01-01
A capacitance/dielectric sensor was designed, constructed, and used to measure in real time the in-situ water concentration in a desiccant water bed. Measurements were carried out with two experimental setups: (1) passing nitrogen through a humidity generator and allowing the gas stream to become saturated at a measured temperature and pressure, and (2) injecting water via a syringe pump into a nitrogen stream. Both water vapor generating devices were attached to a downstream vertically-mounted water capture bed filled with 19.5 g of Moisture Gone desiccant. The sensor consisted of two electrodes: (1) a 1/8" dia stainless steel rod placed in the middle of the bed and (2) the outer shell of the stainless steel bed concentric with the rod. All phases of the water capture process (background, heating, absorption, desorption, and cooling) were monitored with capacitance. The measured capacitance was found to vary linearly with the water content in the bed at frequencies above 100 kHz indicating dipolar motion dominated the signal; below this frequency, ionic motion caused nonlinearities in the water concentration/capacitance relationship. The desiccant exhibited a dielectric relaxation whose activation energy was lowered upon addition of water indicating either a less hindered rotational motion or crystal reorientation.
A New Multifunctional Sensor for Measuring Oil/Water Two-phase State in Pipelines
NASA Astrophysics Data System (ADS)
Sun, Jinwei; Shida, Katsunori
2001-03-01
This paper presents a non-contact U form multi-functional sensor for the oil pipeline flow measurement. Totally four thin and narrow copper plates are twined on both sides of the sensor, from which two variables (capacitance, self inductance) are to be examined as the two functional outputs of the sensor. Thus, the liquid concentration (oil and water), temperature are finally evaluated. The flow velocity inside the pipeline could also be estimated by computing the cross correlation of the capacitance-pair. To restrain the effects of parasitic parameters and improve the dynamic response of the sensor, a proper shielding strategy is considered. A suitable algorithm for data reconstruction is also presented in the system design.
Wu, Ting; Alharbi, Abdullah; You, Kai-Dyi; Kisslinger, Kim; Stach, Eric A; Shahrjerdi, Davood
2017-07-25
Dual-gate field-effect biosensors (bioFETs) with asymmetric gate capacitances were shown to surpass the Nernst limit of 59 mV/pH. However, previous studies have conflicting findings on the effect of the capacitive amplification scheme on the sensor detection limit, which is inversely proportional to the signal-to-noise ratio (SNR). Here, we present a systematic experimental investigation of the SNR using ultrathin silicon transistors. Our sensors operate at low voltage and feature asymmetric front and back oxide capacitances with asymmetry factors of 1.4 and 2.3. We demonstrate that in the dual-gate configuration, the response of our bioFETs to the pH change increases proportional to the asymmetry factor and indeed exceeds the Nernst limit. Further, our results reveal that the noise amplitude also increases in proportion to the asymmetry factor. We establish that the commensurate increase of the noise amplitude originates from the intrinsic low-frequency characteristic of the sensor noise, dominated by number fluctuation. These findings suggest that this capacitive signal amplification scheme does not improve the intrinsic detection limit of the dual-gate biosensors.
NASA Technical Reports Server (NTRS)
Scardelletti, Maximilian C.; Jordan, Jennifer L.; Meredith, Roger D.; Harsh, Kevin; Pilant, Evan; Usrey, Michael W.; Beheim, Glenn M.; Hunter, Gary W.; Zorman, Christian A.
2016-01-01
In this paper, the development and characterization of a packaged pressure sensor system suitable for jet engine health monitoring is demonstrated. The sensing system operates from 97 to 117 MHz over a pressure range from 0 to 350 psi and a temperature range from 25 to 500 deg. The sensing system consists of a Clapp-type oscillator that is fabricated on an alumina substrate and is comprised of a Cree SiC MESFET, MIM capacitors, a wire-wound inductor, chip resistors and a SiCN capacitive pressure sensor. The pressure sensor is located in the LC tank circuit of the oscillator so that a change in pressure causes a change in capacitance, thus changing the resonant frequency of the sensing system. The chip resistors, wire-wound inductors and MIM capacitors have all been characterized at temperature and operational frequency, and perform with less than 5% variance in electrical performance. The measured capacitive pressure sensing system agrees very well with simulated results. The packaged pressure sensing system is specifically designed to measure the pressure on a jet turbofan engine. The packaged system can be installed by way of borescope plug adaptor fitted to a borescope port exposed to the gas path of a turbofan engine.
da Costa, Eduardo Ferreira; de Oliveira, Nestor E.; Morais, Flávio J. O.; Carvalhaes-Dias, Pedro; Duarte, Luis Fernando C.; Cabot, Andreu; Siqueira Dias, J. A.
2017-01-01
We present here the design and fabrication of a self-powered and autonomous fringing field capacitive sensor to measure soil water content. The sensor is manufactured using a conventional printed circuit board and includes a porous ceramic. To read the sensor, we use a circuit that includes a 10 kHz triangle wave generator, an AC amplifier, a precision rectifier and a microcontroller. In terms of performance, the sensor’s capacitance (measured in a laboratory prototype) increases up to 5% when the volumetric water content of the porous ceramic changed from 3% to 36%, resulting in a sensitivity of S=15.5 pF per unity change. Repeatability tests for capacitance measurement showed that the θv sensor’s root mean square error is 0.13%. The average current consumption of the system (sensor and signal conditioning circuit) is less than 1.5 μA, which demonstrates its suitability for being powered by energy harvesting systems. We developed a complete irrigation control system that integrates the sensor, an energy harvesting module composed of a microgenerator installed on the top of a micro sprinkler spinner, and a DC/DC converter circuit that charges a 1 F supercapacitor. The energy harvesting module operates only when the micro sprinkler spinner is irrigating the soil, and the supercapacitor is fully charged to 5 V in about 3 h during the first irrigation. After the first irrigation, with the supercap fully charged, the system can operate powered only by the supercapacitor for approximately 23 days, without any energy being harvested. PMID:28287495
Programmable differential capacitance-to-voltage converter for MEMS accelerometers
NASA Astrophysics Data System (ADS)
Royo, G.; Sánchez-Azqueta, C.; Gimeno, C.; Aldea, C.; Celma, S.
2017-05-01
Capacitive MEMS sensors exhibit an excellent noise performance, high sensitivity and low power consumption. They offer a huge range of applications, being the accelerometer one of its main uses. In this work, we present the design of a capacitance-to-voltage converter in CMOS technology to measure the acceleration from the capacitance variations. It is based on a low-power, fully-differential transimpedance amplifier with low input impedance and a very low input noise.
A novel capacitance sensor for fireside corrosion measurement.
Ban, Heng; Li, Zuoping
2009-11-01
Fireside corrosion in coal-fired power plants is a leading mechanism for boiler tube failures. Online monitoring of fireside corrosion can provide timely data to plant operators for mitigation implementation. This paper presents a novel sensor concept for measuring metal loss based on electrical capacitance. Laboratory-scale experiments demonstrated the feasibility of design, fabrication, and operation of the sensor. The fabrication of the prototype sensor involved sputtering deposition of a thin metal coating with varying thickness on a ceramic substrate. Corrosion metal loss resulted in a proportional decrease in electrical capacitance of the sensor. Laboratory experiments using a muffle furnace with an oxidation environment demonstrated that low carbon steel coatings on ceramic substrate survived cyclic temperatures over 500 degrees C. Measured corrosion rates of sputtered coating in air had an Arrhenius exponential dependence on temperature, with metal thickness loss ranging from 2.0 nm/h at 200 degrees C to 2.0 microm/h at 400 degrees C. Uncertainty analysis indicated that the overall measurement uncertainty was within 4%. The experimental system showed high signal-to-noise ratio, and the sensor could measure submicrometer metal thickness changes. The laboratory experiments demonstrated that the sensor concept and measurement system are capable of short term, online monitoring of metal loss, indicating the potential for the sensor to be used for fireside corrosion monitoring and other metal loss measurement.
A novel capacitance sensor for fireside corrosion measurement
NASA Astrophysics Data System (ADS)
Ban, Heng; Li, Zuoping
2009-11-01
Fireside corrosion in coal-fired power plants is a leading mechanism for boiler tube failures. Online monitoring of fireside corrosion can provide timely data to plant operators for mitigation implementation. This paper presents a novel sensor concept for measuring metal loss based on electrical capacitance. Laboratory-scale experiments demonstrated the feasibility of design, fabrication, and operation of the sensor. The fabrication of the prototype sensor involved sputtering deposition of a thin metal coating with varying thickness on a ceramic substrate. Corrosion metal loss resulted in a proportional decrease in electrical capacitance of the sensor. Laboratory experiments using a muffle furnace with an oxidation environment demonstrated that low carbon steel coatings on ceramic substrate survived cyclic temperatures over 500 °C. Measured corrosion rates of sputtered coating in air had an Arrhenius exponential dependence on temperature, with metal thickness loss ranging from 2.0 nm/h at 200 °C to 2.0 μm/h at 400 °C. Uncertainty analysis indicated that the overall measurement uncertainty was within 4%. The experimental system showed high signal-to-noise ratio, and the sensor could measure submicrometer metal thickness changes. The laboratory experiments demonstrated that the sensor concept and measurement system are capable of short term, online monitoring of metal loss, indicating the potential for the sensor to be used for fireside corrosion monitoring and other metal loss measurement.
On Machine Capacitance Dimensional and Surface Profile Measurement System
NASA Technical Reports Server (NTRS)
Resnick, Ralph
1993-01-01
A program was awarded under the Air Force Machine Tool Sensor Improvements Program Research and Development Announcement to develop and demonstrate the use of a Capacitance Sensor System including Capacitive Non-Contact Analog Probe and a Capacitive Array Dimensional Measurement System to check the dimensions of complex shapes and contours on a machine tool or in an automated inspection cell. The manufacturing of complex shapes and contours and the subsequent verification of those manufactured shapes is fundamental and widespread throughout industry. The critical profile of a gear tooth; the overall shape of a graphite EDM electrode; the contour of a turbine blade in a jet engine; and countless other components in varied applications possess complex shapes that require detailed and complex inspection procedures. Current inspection methods for complex shapes and contours are expensive, time-consuming, and labor intensive.
NASA Astrophysics Data System (ADS)
Bayuwati, Dwi; Waluyo, Tomi B.; Widiyatmoko, Bambang
2015-01-01
An optical fiber optic sensor for detecting land displacement is discussed in this paper. The sensor system consists of a laser at wavelength 1.3 um, optical fiber coupler, optical fiber as sensor and light transmitting media, PIN photodiodedetector system, data logger and personal computer. Sensor was made from a curved optical fiber with diameter 35 mm, which will be changed into a heart-shape fiber if it is pulled. The heart-shape fiber sensor is the modification of the earlier displacement fiber sensor model which was in an ellipse form. Light to and from the optical fiber sensor was transmitted into a length of a multi core, single mode optical fiber cable. The scheme of the optical displacement sensor system has been described here. Characterization in the laboratory has been done by applying a series of pulling mechanism, on the heart-shape fiber sensor; which represents the land displacement process. Characterization in the field was carried out by mounting the sensor system on a scaled-down model of a land slope and artificially reproducing the landslide process using a steady-flow of artificial rainfall as the trigger. The voltage sensor output was recorded during the artificial landslide process. The displacement occurence can be indicated from the declining of the sensor signal received by the detector while the reference signal is steady. Characterization in the laboratory resulted in the performance of the optical fiber land displacement, namely, sensitivity 0.027(mV/mV)/mm, resolution 0.37 mm and measurement range 30 mm; compared with earlier optical fiber sensor performance with similar sensitivity and resolution which works only in 8 mm displacement range. Based on the experiment of landslides simulation in the field, we can define a critical condition in the real situation before landslides occurence to take any measures to prevent more casualties and losses.
A wireless laser displacement sensor node for structural health monitoring.
Park, Hyo Seon; Kim, Jong Moon; Choi, Se Woon; Kim, Yousok
2013-09-30
This study describes a wireless laser displacement sensor node that measures displacement as a representative damage index for structural health monitoring (SHM). The proposed measurement system consists of a laser displacement sensor (LDS) and a customized wireless sensor node. Wireless communication is enabled by a sensor node that consists of a sensor module, a code division multiple access (CDMA) communication module, a processor, and a power module. An LDS with a long measurement distance is chosen to increase field applicability. For a wireless sensor node driven by a battery, we use a power control module with a low-power processor, which facilitates switching between the sleep and active modes, thus maximizing the power consumption efficiency during non-measurement and non-transfer periods. The CDMA mode is also used to overcome the limitation of communication distance, which is a challenge for wireless sensor networks and wireless communication. To evaluate the reliability and field applicability of the proposed wireless displacement measurement system, the system is tested onsite to obtain the required vertical displacement measurements during the construction of mega-trusses and an edge truss, which are the primary structural members in a large-scale irregular building currently under construction. The measurement values confirm the validity of the proposed wireless displacement measurement system and its potential for use in safety evaluations of structural elements.
Graphene-Based Three-Dimensional Capacitive Touch Sensor for Wearable Electronics.
Kang, Minpyo; Kim, Jejung; Jang, Bongkyun; Chae, Youngcheol; Kim, Jae-Hyun; Ahn, Jong-Hyun
2017-08-22
The development of input device technology in a conformal and stretchable format is important for the advancement of various wearable electronics. Herein, we report a capacitive touch sensor with good sensing capabilities in both contact and noncontact modes, enabled by the use of graphene and a thin device geometry. This device can be integrated with highly deformable areas of the human body, such as the forearms and palms. This touch sensor detects multiple touch signals in acute recordings and recognizes the distance and shape of the approaching objects before direct contact is made. This technology offers a convenient and immersive human-machine interface and additional potential utility as a multifunctional sensor for emerging wearable electronics and robotics.
NASA Astrophysics Data System (ADS)
Liang, Shiguo; Ye, Jiamin; Wang, Haigang; Wu, Meng; Yang, Wuqiang
2018-03-01
In the design of electrical capacitance tomography (ECT) sensors, the internal wall thickness can vary with specific applications, and it is a key factor that influences the sensitivity distribution and image quality. This paper will discuss the effect of the wall thickness of ECT sensors on image quality. Three flow patterns are simulated for wall thicknesses of 2.5 mm to 15 mm on eight-electrode ECT sensors. The sensitivity distributions and potential distributions are compared for different wall thicknesses. Linear back-projection and Landweber iteration algorithms are used for image reconstruction. Relative image error and correlation coefficients are used for image evaluation using both simulation and experimental data.
Paper as Active Layer in Inkjet-Printed Capacitive Humidity Sensors
Gaspar, Cristina; Olkkonen, Juuso; Passoja, Soile; Smolander, Maria
2017-01-01
An inkjet-printed relative humidity sensor based on capacitive changes which responds to different humidity levels in the environment is presented in this work. The inkjet-printed silver interdigitated electrodes configuration on the paper substrate allowed for the fabrication of a functional proof-of-concept of the relative humidity sensor, by using the paper itself as a sensing material. The sensor sensitivity in terms of relative humidity changes was calculated to be around 2 pF/RH %. The response time against different temperature steps from 3 to 85 °C was fairly constant (about 4–5 min), and it was considered fast for the aimed application, a smart label. PMID:28640182
Shentu, Nanying; Zhang, Hongjian; Li, Qing; Zhou, Hongliang; Tong, Renyuan; Li, Xiong
2012-01-01
Deep displacement observation is one basic means of landslide dynamic study and early warning monitoring and a key part of engineering geological investigation. In our previous work, we proposed a novel electromagnetic induction-based deep displacement sensor (I-type) to predict deep horizontal displacement and a theoretical model called equation-based equivalent loop approach (EELA) to describe its sensing characters. However in many landslide and related geological engineering cases, both horizontal displacement and vertical displacement vary apparently and dynamically so both may require monitoring. In this study, a II-type deep displacement sensor is designed by revising our I-type sensor to simultaneously monitor the deep horizontal displacement and vertical displacement variations at different depths within a sliding mass. Meanwhile, a new theoretical modeling called the numerical integration-based equivalent loop approach (NIELA) has been proposed to quantitatively depict II-type sensors’ mutual inductance properties with respect to predicted horizontal displacements and vertical displacements. After detailed examinations and comparative studies between measured mutual inductance voltage, NIELA-based mutual inductance and EELA-based mutual inductance, NIELA has verified to be an effective and quite accurate analytic model for characterization of II-type sensors. The NIELA model is widely applicable for II-type sensors’ monitoring on all kinds of landslides and other related geohazards with satisfactory estimation accuracy and calculation efficiency. PMID:22368467
A Magnetic Field Response Recorder: A New Tool for Measurement Acquisition
NASA Technical Reports Server (NTRS)
Woodard, Stanley E.; Taylor, Bryant D.
2006-01-01
A magnetic field response recorder was developed to facilitate a measurement acquisition method that uses magnetic fields to power and to interrogate all sensors. Sensors are designed as electrically passive inductive-capacitive or passive inductive-capacitive-resistive circuits that produce magnetic field responses when electrically activated by oscillating magnetic fields. When electrically activated, the sensor's magnetic field response attributes (frequency, amplitude and bandwidth) correspond to the one or more physical states that each sensor measures. The response recorder makes it possible to simultaneously measure two unrelated physical properties using this class of sensors. The recorder is programmable allowing it to analyze one or more response attributes simultaneously. A single sensor design will be used to demonstrate that the acquisition method and the sensor example can be used to for all phases of a component's life from manufacturing to damage that can destroy it.
Capacitive Extensometer Particularly Suited for Measuring in Vivo Bone Strain
NASA Technical Reports Server (NTRS)
Perusek, Gail P. (Inventor)
2000-01-01
The present invention provides for in vivo measurements of the principal strain magnitudes and directions, and maximum shear strain that occurs in a material, such as human bone, when it is loaded (or subjected to a load). In one embodiment the invention includes a capacitive delta extensometer arranged with six sensors in a three piece configuration, with each sensor of each pair spaced apart from each other by 120 degrees.
Study on silver doped and undoped ZnO thin films working as capacitive sensor
NASA Astrophysics Data System (ADS)
Kiran, S.; Kumar, N. Santhosh; Kumar, S. K. Naveen
2013-06-01
Nanomaterials have been found to exhibit interesting properties like good conductivity, piezoelectricity, high band gap etc. among those metal oxide family, Zinc Oxide has become a material of interest among scientific community. In this paper, we present a method of fabricating capacitive sensors, in which Silver doped ZnO and pure ZnO nanoparticles act as active layer. For the synthesis of the nanoparticle, we followed biosynthesis method and wet chemical method for Ag and Ag doped ZnO nanoparticles respectively. Characterization has been done for both the particles. The XRD pattern taken for the Ag Doped ZnO nanoparticles confirmed the average size of the particles to be 15nm. AFM image of the sample is taken by doping on Silicon wafer. Also we have presented the results of CV characteristics and IV characteristics of the capacitive sensor.
Charge pumping with finger capacitance for body sensor energy harvesting.
Zhou, Alyssa Y; Maharbiz, Michel M
2017-07-01
Sensors are becoming ubiquitous and increasingly integrated with and on the human body; powering such "body network" devices remains an outstanding problem. In this paper, we demonstrate a touch interrogation powered energy harvesting system. This system transforms the kinetic energy of a human finger to electric energy, with each tap producing approximately 1 nJ of energy at a storage capacitor. As is well known for touch display devices, the proximity of a finger can alter the effective value of small capacitances; we demonstrate that these capacitance changes can drive a current which is rectified to charge a capacitor. As a demonstration, an untethered circuit charged this way can deliver enough instantaneous power to light a red LED every ~ 10 seconds. This technology illustrates the ability to communicate with and operate low-power sensors with motions already used for interfacing to devices.
NASA Astrophysics Data System (ADS)
Jain, Geetika; Dalal, Ranjeet; Bhardwaj, Ashutosh; Ranjan, Kirti; Dierlamm, Alexander; Hartmann, Frank; Eber, Robert; Demarteau, Marcel
2018-02-01
P-on-n silicon strip sensors having multiple guard-ring structures have been developed for High Energy Physics applications. The study constitutes the optimization of the sensor design, and fabrication of AC-coupled, poly-silicon biased sensors of strip width of 30 μm and strip pitch of 55 μm. The silicon wafers used for the fabrication are of 4 inch n-type, having an average resistivity of 2-5 k Ω cm, with a thickness of 300 μm. The electrical characterization of these detectors comprises of: (a) global measurements of total leakage current, and backplane capacitance; (b) strip and voltage scans of strip leakage current, poly-silicon resistance, interstrip capacitance, interstrip resistance, coupling capacitance, and dielectric current; and (c) charge collection measurements using ALiBaVa setup. The results of the same are reported here.
NASA Astrophysics Data System (ADS)
Kohyama, Sumihiro; Takahashi, Hidetoshi; Yoshida, Satoru; Onoe, Hiroaki; Hirayama-Shoji, Kayoko; Tsukagoshi, Takuya; Takahata, Tomoyuki; Shimoyama, Isao
2018-04-01
This paper reports on a method to measure a spring constant on site using a micro electro mechanical systems (MEMS) force and displacement sensor. The proposed sensor consists of a force-sensing cantilever and a displacement-sensing cantilever. Each cantilever is composed of two beams with a piezoresistor on the sidewall for measuring the in-plane lateral directional force and displacement. The force resolution and displacement resolution of the fabricated sensor were less than 0.8 µN and 0.1 µm, respectively. We measured the spring constants of two types of hydrogel microparticles to demonstrate the effectiveness of the proposed sensor, with values of approximately 4.3 N m-1 and 15.1 N m-1 obtained. The results indicated that the proposed sensor is effective for on-site spring constant measurement.
Optical Displacement Sensor for Sub-Hertz Applications
NASA Technical Reports Server (NTRS)
Abramovici, Alexander; Chiao, Meng P.; Dekens, Frank G.
2008-01-01
A document discusses a sensor made from off-the-shelf electro-optical photodiodes and electronics that achieves 20 nm/(Hz)(exp 1/2) displacement sensitivity at 1 mHz. This innovation was created using a fiber-coupled laser diode (or Nd:YAG) through a collimator and an aperture as the illumination source. Together with a germanium quad photodiode, the above-mentioned displacement sensor sensitivities have been achieved. This system was designed to aid the Laser Interferometer Space Antenna (LISA) with microthruster tests and to be a backup sensor for monitoring the relative position between a proof mass and a spacecraft for drag-free navigation. The optical displacement sensor can be used to monitor any small displacement from a remote location with minimal invasion on the system.
Shentu, Nanying; Qiu, Guohua; Li, Qing; Tong, Renyuan; Shentu, Nankai; Wang, Yanjie
2015-04-13
Underground displacement monitoring is a key means to monitor and evaluate geological disasters and geotechnical projects. There exist few practical instruments able to monitor subsurface horizontal and vertical displacements simultaneously due to monitoring invisibility and complexity. A novel underground displacement 3D measuring sensor had been proposed in our previous studies, and great efforts have been taken in the basic theoretical research of underground displacement sensing and measuring characteristics by virtue of modeling, simulation and experiments. This paper presents an innovative underground displacement joint inversion method by mixing a specific forward modeling approach with an approximate optimization inversion procedure. It can realize a joint inversion of underground horizontal displacement and vertical displacement for the proposed 3D sensor. Comparative studies have been conducted between the measured and inversed parameters of underground horizontal and vertical displacements under a variety of experimental and inverse conditions. The results showed that when experimentally measured horizontal displacements and vertical displacements are both varied within 0~30 mm, horizontal displacement and vertical displacement inversion discrepancies are generally less than 3 mm and 1 mm, respectively, under three kinds of simulated underground displacement monitoring circumstances. This implies that our proposed underground displacement joint inversion method is robust and efficient to predict the measuring values of underground horizontal and vertical displacements for the proposed sensor.
A Wireless, Passive Sensor for Quantifying Packaged Food Quality.
Tan, Ee Lim; Ng, Wen Ni; Shao, Ranyuan; Pereles, Brandon D; Ong, Keat Ghee
2007-09-05
This paper describes the fabrication of a wireless, passive sensor based on aninductive-capacitive resonant circuit, and its application for in situ monitoring of thequality of dry, packaged food such as cereals, and fried and baked snacks. The sensor ismade of a planar inductor and capacitor printed on a paper substrate. To monitor foodquality, the sensor is embedded inside the food package by adhering it to the package'sinner wall; its response is remotely detected through a coil connected to a sensor reader. Asfood quality degrades due to increasing humidity inside the package, the paper substrateabsorbs water vapor, changing the capacitor's capacitance and the sensor's resonantfrequency. Therefore, the taste quality of the packaged food can be indirectly determined bymeasuring the change in the sensor's resonant frequency. The novelty of this sensortechnology is its wireless and passive nature, which allows in situ determination of foodquality. In addition, the simple fabrication process and inexpensive sensor material ensure alow sensor cost, thus making this technology economically viable.
Mobile patient monitoring based on impedance-loaded SAW-sensors.
Karilainen, Anna; Finnberg, Thomas; Uelzen, Thorsten; Dembowski, Klaus; Müller, Jörg
2004-11-01
A remotely requestable, passive, short-range sensor network for measuring small voltages is presented. The sensor system is able to simultaneously monitor six small voltages in millivolt-range, and it can be used for Holter-electrocardiogram (ECG) and other biopotential monitoring, or in industrial applications. The sensors are based on a surface acoustic wave (SAW) delay line with voltage-dependent, impedance loading on a reflector interdigital transducer (IDT). The load circuit impedance is varied by the capacitance of the voltage-controlled varactor. High resolution is achieved by developing a MOS-capacitor with a thin oxide, low flat-band voltage, and zero-voltage capacitance in the space-charge region, as well as a high-Q-microcoil by thick metal electroplating. Simultaneous monitoring of multiple potentials is realized by time-division-multiplexing of different sensor signals.
A physicochemical mechanism of chemical gas sensors using an AC analysis.
Moon, Jaehyun; Park, Jin-Ah; Lee, Su-Jae; Lee, Jeong-Ik; Zyung, Taehyong; Shin, Eui-Chol; Lee, Jong-Sook
2013-06-21
Electrical modeling of the chemical gas sensors was successfully applied to TiO2 nanofiber gas sensors by developing an equivalent circuit model where the junction capacitance as well as the resistance can be separated from the comparable stray capacitance. The Schottky junction impedance exhibited a characteristic skewed arc described by a Cole-Davidson function, and the variation of the fit and derived parameters with temperature, bias, and NO2 gas concentration indicated definitely a physicochemical sensing mechanism based on the Pt|TiO2 Schottky junctions against the conventional supposition of the enhanced sensitivity in nanostructured gas sensors with high grain boundary/surface area. Analysis on a model Pt|TiO2|Pt structure also confirmed the characteristic impedance response of TiO2 nanofiber sensors.
Liu, Ming-Qing; Wang, Cong; Kim, Nam-Young
2017-01-01
In this study, a high-sensitivity and low-hysteresis porous metal–insulator–metal-type capacitive humidity sensor is investigated using a functional polymer mixed with TiO2 microparticles. The humidity sensor consists of an optimally designed porous top electrode, a functional polymer humidity sensitive layer, a bottom electrode, and a glass substrate. The porous top electrode is designed to increase the contact area between the sensing layer and water vapor, leading to high sensitivity and quick response time. The functional polymer mixed with TiO2 microparticles shows excellent hysteresis under a wide humidity-sensing range with good long-term stability. The results show that as the relative humidity ranges from 10% RH to 90% RH, the proposed humidity sensor achieves a high sensitivity of 0.85 pF/% RH and a fast response time of less than 35 s. Furthermore, the sensor shows an ultra-low hysteresis of 0.95% RH at 60% RH, a good temperature dependence, and a stable capacitance value with a maximum of 0.17% RH drift during 120 h of continuous test. PMID:28157167
Moisture content measurement in paddy
NASA Astrophysics Data System (ADS)
Klomklao, P.; Kuntinugunetanon, S.; Wongkokua, W.
2017-09-01
Moisture content is an important quantity for agriculture product, especially in paddy. In principle, the moisture content can be measured by a gravimetric method which is a direct method. However, the gravimetric method is time-consuming. There are indirect methods such as resistance and capacitance methods. In this work, we developed an indirect method based on a 555 integrated circuit timer. The moisture content sensor was capacitive parallel plates using the dielectric constant property of the moisture. The instrument generated the output frequency that depended on the capacitance of the sensor. We fitted a linear relation between periods and moisture contents. The measurement results have a standard uncertainty of 1.23 % of the moisture content in the range of 14 % to 20 %.
High-precision micro-displacement optical-fiber sensor based on surface plasmon resonance.
Zhu, Zongda; Liu, Lu; Liu, Zhihai; Zhang, Yu; Zhang, Yaxun
2017-05-15
We propose and demonstrate a novel optical-fiber micro-displacement sensor based on surface plasmon resonance (SPR) by fabricating a Kretschmann configuration on graded-index multimode fiber (GIMMF). We employ a single-mode fiber to change the radial position of the incident beam as the displacement. In the GIMMF, the angle between the light beam and fiber axis, which is closely related to the resonance angle, is changed by the displacement; thus, the resonance wavelength of the fiber SPR shifts. This micro-displacement fiber sensor has a wide detection range of 0-25 μm, a high sensitivity with maximum up to 10.32 nm/μm, and a nanometer resolution with minimum to 2 nm, which transcends almost all of other optical-fiber micro-displacement sensors. In addition, we also research that increasing the fiber polishing angle or medium refractive index can improve the sensitivity. This micro-displacement sensor will have a great significance in many industrial applications and provide a neoteric, rapid, and accurate optical measurement method in micro-displacement.
Matsuya, Iwao; Katamura, Ryuta; Sato, Maya; Iba, Miroku; Kondo, Hideaki; Kanekawa, Kiyoshi; Takahashi, Motoichi; Hatada, Tomohiko; Nitta, Yoshihiro; Tanii, Takashi; Shoji, Shuichi; Nishitani, Akira; Ohdomari, Iwao
2010-01-01
We propose a novel sensor system for monitoring the structural health of a building. The system optically measures the relative-story displacement during earthquakes for detecting any deformations of building elements. The sensor unit is composed of three position sensitive detectors (PSDs) and lenses capable of measuring the relative-story displacement precisely, even if the PSD unit was inclined in response to the seismic vibration. For verification, laboratory tests were carried out using an Xθ-stage and a shaking table. The static experiment verified that the sensor could measure the local inclination angle as well as the lateral displacement. The dynamic experiment revealed that the accuracy of the sensor was 150 μm in the relative-displacement measurement and 100 μrad in the inclination angle measurement. These results indicate that the proposed sensor system has sufficient accuracy for the measurement of relative-story displacement in response to the seismic vibration.
Fabrication and characterization of bending and pressure sensors for a soft prosthetic hand
NASA Astrophysics Data System (ADS)
Rocha, Rui Pedro; Alhais Lopes, Pedro; de Almeida, Anibal T.; Tavakoli, Mahmoud; Majidi, Carmel
2018-03-01
We demonstrate fabrication, characterization, and implementation of ‘soft-matter’ pressure and bending sensors for a soft robotic hand. The elastomer-based sensors are embedded in a robot finger composed of a 3D printed endoskeleton and covered by an elastomeric skin. Two types of sensors are evaluated, resistive pressure sensors and capacitive pressure sensors. The sensor is fabricated entirely out of insulating and conductive rubber, the latter composed of polydimethylsiloxane (PDMS) elastomer embedded with a percolating network of structured carbon black (CB). The sensor-integrated fingers have a simple materials architecture, can be fabricated with standard rapid prototyping methods, and are inexpensive to produce. When incorporated into a robotic hand, the CB-PDMS sensors and PDMS carrier medium function as an ‘artificial skin’ for touch and bend detection. Results show improved response with a capacitive sensor architecture, which, unlike a resistive sensor, is robust to electromechanical hysteresis, creep, and drift in the CB-PDMS composite. The sensorized fingers are integrated in an anthropomorphic hand and results for a variety of grasping tasks are presented.
NASA Astrophysics Data System (ADS)
Wang, Bowen; Li, Yuanyuan; Xie, Xinliang; Huang, Wenmei; Weng, Ling; Zhang, Changgeng
2018-05-01
Based on the Wiedemann effect and inverse magnetostritive effect, the output voltage model of a magnetostrictive displacement sensor has been established. The output voltage of the magnetostrictive displacement sensor is calculated in different magnetic fields. It is found that the calculating result is in an agreement with the experimental one. The theoretical and experimental results show that the output voltage of the displacement sensor is linearly related to the magnetostrictive differences, (λl-λt), of waveguide wires. The measured output voltages for Fe-Ga and Fe-Ni wire sensors are 51.5mV and 36.5mV, respectively, and the output voltage of Fe-Ga wire sensor is obviously higher than that of Fe-Ni wire sensor under the same magnetic field. The model can be used to predict the output voltage of the sensor and to provide guidance for the optimization design of the sensor.
Zhang, Song; Ding, Jingjing; Liu, Ying; Kong, Jilie; Hofstetter, Oliver
2006-11-01
This work describes a highly enantioselective and sensitive immunosensor for the detection of chiral amino acids based on capacitive measurement. The sensor was prepared by first binding mercaptoacetic acid to the surface of a gold electrode, followed by modification with tyramine utilizing carbodiimide activation. The hapten 4-amino-D-phenylalanine was then covalently immobilized onto the electrode by diazotization. Stereoselective binding of an anti-D-amino acid antibody to the hapten-modified sensor surface resulted in capacitance changes that were detected with high sensitivity by a potentiostatic step method. Using capacitance measurement, detection limits of 5 pg of antibody/mL were attained. The exquisite stereoselectivity of the antibody was also utilized in a competitive setup to quantitatively determine the concentration of the analyte d-phenylalanine in nonracemic samples containing both enantiomers of this amino acid. Trace impurities of d-phenylalanine as low as 0.001% could be detected.
Analysis of a Segmented Annular Coplanar Capacitive Tilt Sensor with Increased Sensitivity.
Guo, Jiahao; Hu, Pengcheng; Tan, Jiubin
2016-01-21
An investigation of a segmented annular coplanar capacitor is presented. We focus on its theoretical model, and a mathematical expression of the capacitance value is derived by solving a Laplace equation with Hankel transform. The finite element method is employed to verify the analytical result. Different control parameters are discussed, and each contribution to the capacitance value of the capacitor is obtained. On this basis, we analyze and optimize the structure parameters of a segmented coplanar capacitive tilt sensor, and three models with different positions of the electrode gap are fabricated and tested. The experimental result shows that the model (whose electrode-gap position is 10 mm from the electrode center) realizes a high sensitivity: 0.129 pF/° with a non-linearity of <0.4% FS (full scale of ± 40°). This finding offers plenty of opportunities for various measurement requirements in addition to achieving an optimized structure in practical design.
CMOS capacitive biosensors for highly sensitive biosensing applications.
Chang, An-Yu; Lu, Michael S-C
2013-01-01
Magnetic microbeads are widely used in biotechnology and biomedical research for manipulation and detection of cells and biomolecules. Most lab-on-chip systems capable of performing manipulation and detection require external instruments to perform one of the functions, leading to increased size and cost. This work aims at developing an integrated platform to perform these two functions by implementing electromagnetic microcoils and capacitive biosensors on a CMOS (complementary metal oxide semiconductor) chip. Compared to most magnetic-type sensors, our detection method requires no externally applied magnetic fields and the associated fabrication is less complicated. In our experiment, microbeads coated with streptavidin were driven to the sensors located in the center of microcoils with functionalized anti-streptavidin antibody. Detection of a single microbead was successfully demonstrated using a capacitance-to-frequency readout. The average capacitance changes for the experimental and control groups were -5.3 fF and -0.2 fF, respectively.
Humidity Sensors Printed on Recycled Paper and Cardboard
Mraović, Matija; Muck, Tadeja; Pivar, Matej; Trontelj, Janez; Pleteršek, Anton
2014-01-01
Research, design, fabrication and results of various screen printed capacitive humidity sensors is presented in this paper. Two types of capacitive humidity sensors have been designed and fabricated via screen printing on recycled paper and cardboard, obtained from the regional paper and cardboard industry. As printing ink, commercially available silver nanoparticle-based conductive ink was used. A considerable amount of work has been devoted to the humidity measurement methods using paper as a dielectric material. Performances of different structures have been tested in a humidity chamber. Relative humidity in the chamber was varied in the range of 35%–80% relative humidity (RH) at a constant temperature of 23 °C. Parameters of interest were capacitance and conductance of each sensor material, as well as long term behaviour. Process reversibility has also been considered. The results obtained show a mainly logarithmic response of the paper sensors, with the only exception being cardboard-based sensors. Recycled paper-based sensors exhibit a change in value of three orders of magnitude, whereas cardboard-based sensors have a change in value of few 10s over the entire scope of relative humidity range (RH 35%–90%). Two different types of capacitor sensors have been investigated: lateral (comb) type sensors and modified, perforated flat plate type sensors. The objective of the present work was to identify the most important factors affecting the material performances with humidity, and to contribute to the development of a sensor system supported with a Radio Frequency Identification (RFID) chip directly on the material, for use in smart packaging applications. Therefore, the authors built a passive and a battery-supported wireless module based on SL900A smart sensory tag's IC to achieve UHF-RFID functionality with data logging capability. PMID:25072347
A novel instrument for generating angular increments of 1 nanoradian
NASA Astrophysics Data System (ADS)
Alcock, Simon G.; Bugnar, Alex; Nistea, Ioana; Sawhney, Kawal; Scott, Stewart; Hillman, Michael; Grindrod, Jamie; Johnson, Iain
2015-12-01
Accurate generation of small angles is of vital importance for calibrating angle-based metrology instruments used in a broad spectrum of industries including mechatronics, nano-positioning, and optic fabrication. We present a novel, piezo-driven, flexure device capable of reliably generating micro- and nanoradian angles. Unlike many such instruments, Diamond Light Source's nano-angle generator (Diamond-NANGO) does not rely on two separate actuators or rotation stages to provide coarse and fine motion. Instead, a single Physik Instrumente NEXLINE "PiezoWalk" actuator provides millimetres of travel with nanometre resolution. A cartwheel flexure efficiently converts displacement from the linear actuator into rotary motion with minimal parasitic errors. Rotation of the flexure is directly measured via a Magnescale "Laserscale" angle encoder. Closed-loop operation of the PiezoWalk actuator, using high-speed feedback from the angle encoder, ensures that the Diamond-NANGO's output drifts by only ˜0.3 nrad rms over ˜30 min. We show that the Diamond-NANGO can reliably move with unprecedented 1 nrad (˜57 ndeg) angular increments over a range of >7000 μrad. An autocollimator, interferometer, and capacitive displacement sensor are used to independently confirm the Diamond-NANGO's performance by simultaneously measuring the rotation of a reflective cube.
A novel instrument for generating angular increments of 1 nanoradian.
Alcock, Simon G; Bugnar, Alex; Nistea, Ioana; Sawhney, Kawal; Scott, Stewart; Hillman, Michael; Grindrod, Jamie; Johnson, Iain
2015-12-01
Accurate generation of small angles is of vital importance for calibrating angle-based metrology instruments used in a broad spectrum of industries including mechatronics, nano-positioning, and optic fabrication. We present a novel, piezo-driven, flexure device capable of reliably generating micro- and nanoradian angles. Unlike many such instruments, Diamond Light Source's nano-angle generator (Diamond-NANGO) does not rely on two separate actuators or rotation stages to provide coarse and fine motion. Instead, a single Physik Instrumente NEXLINE "PiezoWalk" actuator provides millimetres of travel with nanometre resolution. A cartwheel flexure efficiently converts displacement from the linear actuator into rotary motion with minimal parasitic errors. Rotation of the flexure is directly measured via a Magnescale "Laserscale" angle encoder. Closed-loop operation of the PiezoWalk actuator, using high-speed feedback from the angle encoder, ensures that the Diamond-NANGO's output drifts by only ∼0.3 nrad rms over ∼30 min. We show that the Diamond-NANGO can reliably move with unprecedented 1 nrad (∼57 ndeg) angular increments over a range of >7000 μrad. An autocollimator, interferometer, and capacitive displacement sensor are used to independently confirm the Diamond-NANGO's performance by simultaneously measuring the rotation of a reflective cube.
NASA Astrophysics Data System (ADS)
Zheng, Yong; Huang, Da; Zhu, Zheng-Wei
2018-03-01
A novel and simple fiber-optic sensor for measuring a large displacement range in civil engineering has been developed. The sensor incorporates an extremely simple bowknot bending modulation that increases its sensitivity in bending, light source and detector. In this paper, to better understand the working principle and improve the performance of the sensor, the transduction of displacement to light loss is described analytically by using the geometry of sensor and principle of optical fiber loss. Results of the calibration tests show a logarithmic function relationship between light loss and displacement with two calibrated parameters. The sensor has a response over a wide displacement range of 44.7 mm with an initial accuracy of 2.65 mm, while for a small displacement range of 34 mm it shows a more excellent accuracy of 0.98 mm. The direct shear tests for the six models with the same dimensions were conducted to investigate the application of the sensor for warning the shear and sliding failure in civil engineering materials or geo-materials. Results address that the sliding displacement of sliding body can be relatively accurately captured by the theory logarithmic relation between sliding distance and optical loss in a definite structure, having a large dynamic range of 22.32 mm with an accuracy of 0.99 mm, which suggests that the sensor has a promising prospect in monitoring civil engineering, especially for landslides.
The Calibration and Use of Capacitance Sensors to Monitor Stem Water Content in Trees.
Matheny, Ashley M; Garrity, Steven R; Bohrer, Gil
2017-12-27
Water transport and storage through the soil-plant-atmosphere continuum is critical to the terrestrial water cycle, and has become a major research focus area. Biomass capacitance plays an integral role in the avoidance of hydraulic impairment to transpiration. However, high temporal resolution measurements of dynamic changes in the hydraulic capacitance of large trees are rare. Here, we present procedures for the calibration and use of capacitance sensors, typically used to monitor soil water content, to measure the volumetric water content in trees in the field. Frequency domain reflectometry-style observations are sensitive to the density of the media being studied. Therefore, it is necessary to perform species-specific calibrations to convert from the sensor-reported values of dielectric permittivity to volumetric water content. Calibration is performed on a harvested branch or stem cut into segments that are dried or re-hydrated to produce a full range of water contents used to generate a best-fit regression with sensor observations. Sensors are inserted into calibration segments or installed in trees after pre-drilling holes to a tolerance fit using a fabricated template to ensure proper drill alignment. Special care is taken to ensure that sensor tines make good contact with the surrounding media, while allowing them to be inserted without excessive force. Volumetric water content dynamics observed via the presented methodology align with sap flow measurements recorded using thermal dissipation techniques and environmental forcing data. Biomass water content data can be used to observe the onset of water stress, drought response and recovery, and has the potential to be applied to the calibration and evaluation of new plant-level hydrodynamics models, as well as to the partitioning of remotely sensed moisture products into above- and belowground components.
Inductive displacement sensors with a notch filter for an active magnetic bearing system.
Chen, Seng-Chi; Le, Dinh-Kha; Nguyen, Van-Sum
2014-07-15
Active magnetic bearing (AMB) systems support rotating shafts without any physical contact, using electromagnetic forces. Each radial AMB uses two pairs of electromagnets at opposite sides of the rotor. This allows the rotor to float in the air gap, and the machine to operate without frictional losses. In active magnetic suspension, displacement sensors are necessary to detect the radial and axial movement of the suspended object. In a high-speed rotating machine equipped with an AMB, the rotor bending modes may be limited to the operating range. The natural frequencies of the rotor can cause instability. Thus, notch filters are a useful circuit for stabilizing the system. In addition, commercial displacement sensors are sometimes not suitable for AMB design, and cannot filter the noise caused by the natural frequencies of rotor. Hence, implementing displacement sensors based on the AMB structure is necessary to eliminate noises caused by natural frequency disturbances. The displacement sensor must be highly sensitive in the desired working range, and also exhibit a low interference noise, high stability, and low cost. In this study, we used the differential inductive sensor head and lock-in amplifier for synchronous demodulation. In addition, an active low-pass filter and a notch filter were used to eliminate disturbances, which caused by natural frequencies. As a consequence, the inductive displacement sensor achieved satisfactory linearity, high sensitivity, and disturbance elimination. This sensor can be easily produced for AMB applications. A prototype of these displacement sensors was built and tested.
NASA Technical Reports Server (NTRS)
Vranish, John M.
2006-01-01
The term "virtual feel" denotes a type of capaciflector (an advanced capacitive proximity sensor) and a methodology for designing and using a sensor of this type to guide a robot in manipulating a tool (e.g., a wrench socket) into alignment with a mating fastener (e.g., a bolt head) or other electrically conductive object. A capaciflector includes at least one sensing electrode, excited with an alternating voltage, that puts out a signal indicative of the capacitance between that electrode and a proximal object.
Perfume Fragrance Discrimination Using Resistance And Capacitance Responses Of Polymer Sensors
NASA Astrophysics Data System (ADS)
Lima, John Paul Hempel; Vandendriessche, Thomas; Fonseca, Fernando J.; Lammertyn, Jeroen; Nicolai, Bart M.; de Andrade, Adnei Melges
2009-05-01
This work shows a comparison between electrical resistance and capacitance responses of ethanol and five different fragrances using an electronic nose based on conducting polymers. Gas chromatography—mass spectrometry (GC-MS) measurements were performed to evaluate the main differences between the analytes. It is shown that although the fragrances are quite similar in their compositions the sensors are able to discriminate them through PCA (Principal Component Analysis) and ANNs (Artificial Neural Network) analysis.
Non-contact capacitance based image sensing method and system
Novak, J.L.; Wiczer, J.J.
1994-01-25
A system and a method for imaging desired surfaces of a workpiece is described. A sensor having first and second sensing electrodes which are electrically isolated from the workpiece is positioned above and in proximity to the desired surfaces of the workpiece. An electric field is developed between the first and second sensing electrodes of the sensor in response to input signals being applied thereto and capacitance signals are developed which are indicative of any disturbances in the electric field as a result of the workpiece. An image signal of the workpiece may be developed by processing the capacitance signals. The image signals may provide necessary control information to a machining device for machining the desired surfaces of the workpiece in processes such as deburring or chamfering. Also, the method and system may be used to image dimensions of weld pools on a workpiece and surfaces of glass vials. The sensor may include first and second preview sensors used to determine the feed rate of a workpiece with respect to the machining device. 18 figures.
Non-contact capacitance based image sensing method and system
Novak, J.L.; Wiczer, J.J.
1995-01-03
A system and a method is provided for imaging desired surfaces of a workpiece. A sensor having first and second sensing electrodes which are electrically isolated from the workpiece is positioned above and in proximity to the desired surfaces of the workpiece. An electric field is developed between the first and second sensing electrodes of the sensor in response to input signals being applied thereto and capacitance signals are developed which are indicative of any disturbances in the electric field as a result of the workpiece. An image signal of the workpiece may be developed by processing the capacitance signals. The image signals may provide necessary control information to a machining device for machining the desired surfaces of the workpiece in processes such as deburring or chamfering. Also, the method and system may be used to image dimensions of weld pools on a workpiece and surfaces of glass vials. The sensor may include first and second preview sensors used to determine the feed rate of a workpiece with respect to the machining device. 18 figures.
The detection of organic solvent vapor by using polymer coated chemocapacitor sensor
NASA Astrophysics Data System (ADS)
Rusdiarna Indrapraja, Apik; Rivai, Muhammad; Arifin, Achmad; Purwanto, Djoko
2017-05-01
A chemocapacitor consists of planar interdigital electrodes (IDE) made by two comb electrodes on a substrate. A dielectric film was applied on the electrodes in which the absorbed vapor will modify its permittivity. This study has fabricated chemocapacitor with the IDE distance of 0.5 mm, while the dielectric film was a sensitive layer consisting of a polymeric material. The deposition of the polymeric film was accomplished by drop casting. A sensor array consisting of four chemocapacitors coated with different polymers namely PEG-1540, PEG-20M, PEG-6000, and PVP was used to obtain the pattern of shift in the capacitance. The integrated circuit AD7746 was used as the capacitance to-digital converter (CDC). The organic solvents of ethanol, benzene, and aceton were used as the vapor samples in this experiment. The results showed that the change in the capacitance value increases proportionally to the concentration of vapour where sensors coated with PEG-1540 and PVP have higher sensitivity, i.e. 0.0028pF/part per thousand and 0.0027pF/part per thousand, respectively. Based on the capacitance to digital conversion capabilities, the system provides there solution of 0.4084ppm. The sensor array could produce a different pattern for each of the vapor sample. The Neural Network pattern recognition system could identify the type of vapor automatically with the root mean square error of 10-5
Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction
Marigó, Eloi; Sansa, Marc; Pérez-Murano, Francesc; Uranga, Arantxa; Barniol, Núria
2015-01-01
A top-down clamped-clamped beam integrated in a CMOS technology with a cross section of 500 nm × 280 nm has been electrostatic actuated and sensed using two different transduction methods: capacitive and piezoresistive. The resonator made from a single polysilicon layer has a fundamental in-plane resonance at 27 MHz. Piezoresistive transduction avoids the effect of the parasitic capacitance assessing the capability to use it and enhance the CMOS-NEMS resonators towards more efficient oscillator. The displacement derived from the capacitive transduction allows to compute the gauge factor for the polysilicon material available in the CMOS technology. PMID:26184222
Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction.
Marigó, Eloi; Sansa, Marc; Pérez-Murano, Francesc; Uranga, Arantxa; Barniol, Núria
2015-07-14
A top-down clamped-clamped beam integrated in a CMOS technology with a cross section of 500 nm × 280 nm has been electrostatic actuated and sensed using two different transduction methods: capacitive and piezoresistive. The resonator made from a single polysilicon layer has a fundamental in-plane resonance at 27 MHz. Piezoresistive transduction avoids the effect of the parasitic capacitance assessing the capability to use it and enhance the CMOS-NEMS resonators towards more efficient oscillator. The displacement derived from the capacitive transduction allows to compute the gauge factor for the polysilicon material available in the CMOS technology.
40 CFR 1065.215 - Pressure transducers, temperature sensors, and dewpoint sensors.
Code of Federal Regulations, 2014 CFR
2014-07-01
... sensors, such as resistive temperature detectors (RTDs). (d) Pressure. Pressure transducers must be... chilled-surface hygrometers, which include chilled mirror detectors and chilled surface acoustic wave (SAW) detectors. For other applications, we recommend thin-film capacitance sensors. You may use other dewpoint...
40 CFR 1065.215 - Pressure transducers, temperature sensors, and dewpoint sensors.
Code of Federal Regulations, 2013 CFR
2013-07-01
... sensors, such as resistive temperature detectors (RTDs). (d) Pressure. Pressure transducers must be... chilled-surface hygrometers, which include chilled mirror detectors and chilled surface acoustic wave (SAW) detectors. For other applications, we recommend thin-film capacitance sensors. You may use other dewpoint...
40 CFR 1065.215 - Pressure transducers, temperature sensors, and dewpoint sensors.
Code of Federal Regulations, 2011 CFR
2011-07-01
... sensors, such as resistive temperature detectors (RTDs). (d) Pressure. Pressure transducers must be... chilled-surface hygrometers, which include chilled mirror detectors and chilled surface acoustic wave (SAW) detectors. For other applications, we recommend thin-film capacitance sensors. You may use other dewpoint...
40 CFR 1065.215 - Pressure transducers, temperature sensors, and dewpoint sensors.
Code of Federal Regulations, 2012 CFR
2012-07-01
... sensors, such as resistive temperature detectors (RTDs). (d) Pressure. Pressure transducers must be... chilled-surface hygrometers, which include chilled mirror detectors and chilled surface acoustic wave (SAW) detectors. For other applications, we recommend thin-film capacitance sensors. You may use other dewpoint...
Mirzajani, Hadi; Cheng, Cheng; Wu, Jayne; Chen, Jiangang; Eda, Shigotoshi; Najafi Aghdam, Esmaeil; Badri Ghavifekr, Habib
2017-03-15
A rapid, highly sensitive, specific and low-cost capacitive affinity biosensor is presented here for label-free and single step detection of Bisphenol A (BPA). The sensor design allows rapid prototyping at low-cost using printed circuit board material by benchtop equipment. High sensitivity detection is achieved through the use of a BPA-specific aptamer as probe molecule and large electrodes to enhance AC-electroelectrothermal effect for long-range transport of BPA molecules toward electrode surface. Capacitive sensing technique is used to determine the bounded BPA level by measuring the sample/electrode interfacial capacitance of the sensor. The developed biosensor can detect BPA level in 20s and exhibits a large linear range from 1 fM to 10 pM, with a limit of detection (LOD) of 152.93 aM. This biosensor was applied to test BPA in canned food samples and could successfully recover the levels of spiked BPA. This sensor technology is demonstrated to be highly promising and reliable for rapid, sensitive and on-site monitoring of BPA in food samples. Copyright © 2016 Elsevier B.V. All rights reserved.
Wu, Ting; Alharbi, Abdullah; You, Kai-Dyi; ...
2017-06-21
Dual-gate field-effect biosensors (bioFETs) with asymmetric gate capacitances were shown to surpass the Nernst limit of 59 mV/pH. However, previous studies have conflicting findings on the effect of the capacitive amplification scheme on the sensor detection limit, which is inversely proportional to the signal-to-noise ratio (SNR). In this paper, we present a systematic experimental investigation of the SNR using ultrathin silicon transistors. Our sensors operate at low voltage and feature asymmetric front and back oxide capacitances with asymmetry factors of 1.4 and 2.3. We demonstrate that in the dual-gate configuration, the response of our bioFETs to the pH change increasesmore » proportional to the asymmetry factor and indeed exceeds the Nernst limit. Further, our results reveal that the noise amplitude also increases in proportion to the asymmetry factor. We establish that the commensurate increase of the noise amplitude originates from the intrinsic low-frequency characteristic of the sensor noise, dominated by number fluctuation. Finally, these findings suggest that this capacitive signal amplification scheme does not improve the intrinsic detection limit of the dual-gate biosensors.« less
DOE Office of Scientific and Technical Information (OSTI.GOV)
Wu, Ting; Alharbi, Abdullah; You, Kai-Dyi
Dual-gate field-effect biosensors (bioFETs) with asymmetric gate capacitances were shown to surpass the Nernst limit of 59 mV/pH. However, previous studies have conflicting findings on the effect of the capacitive amplification scheme on the sensor detection limit, which is inversely proportional to the signal-to-noise ratio (SNR). In this paper, we present a systematic experimental investigation of the SNR using ultrathin silicon transistors. Our sensors operate at low voltage and feature asymmetric front and back oxide capacitances with asymmetry factors of 1.4 and 2.3. We demonstrate that in the dual-gate configuration, the response of our bioFETs to the pH change increasesmore » proportional to the asymmetry factor and indeed exceeds the Nernst limit. Further, our results reveal that the noise amplitude also increases in proportion to the asymmetry factor. We establish that the commensurate increase of the noise amplitude originates from the intrinsic low-frequency characteristic of the sensor noise, dominated by number fluctuation. Finally, these findings suggest that this capacitive signal amplification scheme does not improve the intrinsic detection limit of the dual-gate biosensors.« less
Packaging Technologies for 500C SiC Electronics and Sensors
NASA Technical Reports Server (NTRS)
Chen, Liang-Yu
2013-01-01
Various SiC electronics and sensors are currently under development for applications in 500C high temperature environments such as hot sections of aerospace engines and the surface of Venus. In order to conduct long-term test and eventually commercialize these SiC devices, compatible packaging technologies for the SiC electronics and sensors are required. This presentation reviews packaging technologies developed for 500C SiC electronics and sensors to address both component and subsystem level packaging needs for high temperature environments. The packaging system for high temperature SiC electronics includes ceramic chip-level packages, ceramic printed circuit boards (PCBs), and edge-connectors. High temperature durable die-attach and precious metal wire-bonding are used in the chip-level packaging process. A high temperature sensor package is specifically designed to address high temperature micro-fabricated capacitive pressure sensors for high differential pressure environments. This presentation describes development of these electronics and sensor packaging technologies, including some testing results of SiC electronics and capacitive pressure sensors using these packaging technologies.
Sol-Gel Zinc Oxide Humidity Sensors Integrated with a Ring Oscillator Circuit On-a-Chip
Yang, Ming-Zhi; Dai, Ching-Liang; Wu, Chyan-Chyi
2014-01-01
The study develops an integrated humidity microsensor fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated humidity sensor consists of a humidity sensor and a ring oscillator circuit on-a-chip. The humidity sensor is composed of a sensitive film and branch interdigitated electrodes. The sensitive film is zinc oxide prepared by sol-gel method. After completion of the CMOS process, the sensor requires a post-process to remove the sacrificial oxide layer and to coat the zinc oxide film on the interdigitated electrodes. The capacitance of the sensor changes when the sensitive film adsorbs water vapor. The circuit is used to convert the capacitance of the humidity sensor into the oscillation frequency output. Experimental results show that the output frequency of the sensor changes from 84.3 to 73.4 MHz at 30 °C as the humidity increases 40 to 90 %RH. PMID:25353984
NASA Astrophysics Data System (ADS)
Basak, Nupur
A potentially implantable single crystal 3C-SiC pressure sensor for blood pressure measurement was designed, simulated, fabricated, characterized and optimized. This research uses a single crystal 3C-SiC, for the first time, to demonstrate its application as a blood pressure measurement sensor. The sensor, which uses the epitaxial grown 3C-SiC membrane to measure changes in pressure, is designed to be wireless, biocompatible and linear. The SiC material was chosen for its superior physical, chemical and mechanical properties; the capacitive sensor uses a 3C-SiC membrane as one of the electrodes; and, the sensor system is wireless for comfort and to allow for convenient reading of real-time pressure data (wireless communication is enabled by connecting the sensor parallel to a planar inductor). Together, the variable capacitive sensor and planar inductor create a pressure sensitive resonant circuit. The sensor system described above allows for implantation into a human patient's body, after which the planar inductor can be coupled with an external inductor to receive data for real-time blood pressure measurement. Electroplating, thick photo-resist characterization, RIE etching, oxidation, CVD, chemical mechanical polishing and wafer bonding were optimized during the process of fabricating the sensor system and, in addition to detailing the sensor system simulation and characterization; the optimized processes are detailed in the dissertation. This absolute pressure sensor is designed to function optimally within the human blood pressure range of 50-350mmHg. The layout and modeling of the sensor uses finite element analysis (FEA) software. The simulations for membrane deflection, stress analysis and electro-mechanical analysis are performed for 100 μm2 and 400μm2sensors. The membrane deflection-pressure, capacitance-pressure and resonant frequency-pressure graphs were obtained, and detailed in the dissertation, along with the planar inductor simulation for differently sized inductors. Ultimately, an optimized sensor with a size of 400μm2 was chosen because of its high sensitivity. The sensor, and the planar inductor, which is 3mm 2, is comparable to the presently researched implantable chip size. The measured inductance of the gold electroplated inductor is 0.371μH. The capacitance changes from 0.934 pF to 0.997pF with frequency shift of 248MHz to 256 MHz. The sensitivity of the sensor is found to be 0.21 fF/mmHg or 27.462 kHz/mmHg with an average non-linearity of 0.23216%.
Resonance-induced sensitivity enhancement method for conductivity sensors
NASA Technical Reports Server (NTRS)
Tai, Yu-Chong (Inventor); Shih, Chi-yuan (Inventor); Li, Wei (Inventor); Zheng, Siyang (Inventor)
2009-01-01
Methods and systems for improving the sensitivity of a variety of conductivity sensing devices, in particular capacitively-coupled contactless conductivity detectors. A parallel inductor is added to the conductivity sensor. The sensor with the parallel inductor is operated at a resonant frequency of the equivalent circuit model. At the resonant frequency, parasitic capacitances that are either in series or in parallel with the conductance (and possibly a series resistance) is substantially removed from the equivalent circuit, leaving a purely resistive impedance. An appreciably higher sensor sensitivity results. Experimental verification shows that sensitivity improvements of the order of 10,000-fold are possible. Examples of detecting particulates with high precision by application of the apparatus and methods of operation are described.
MEMS based hair flow-sensors as model systems for acoustic perception studies
NASA Astrophysics Data System (ADS)
Krijnen, Gijs J. M.; Dijkstra, Marcel; van Baar, John J.; Shankar, Siripurapu S.; Kuipers, Winfred J.; de Boer, Rik J. H.; Altpeter, Dominique; Lammerink, Theo S. J.; Wiegerink, Remco
2006-02-01
Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors, allowing for capacitive read-out. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplification) and their susceptibility to noise (stochastic resonance).
Research on Joint Parameter Inversion for an Integrated Underground Displacement 3D Measuring Sensor
Shentu, Nanying; Qiu, Guohua; Li, Qing; Tong, Renyuan; Shentu, Nankai; Wang, Yanjie
2015-01-01
Underground displacement monitoring is a key means to monitor and evaluate geological disasters and geotechnical projects. There exist few practical instruments able to monitor subsurface horizontal and vertical displacements simultaneously due to monitoring invisibility and complexity. A novel underground displacement 3D measuring sensor had been proposed in our previous studies, and great efforts have been taken in the basic theoretical research of underground displacement sensing and measuring characteristics by virtue of modeling, simulation and experiments. This paper presents an innovative underground displacement joint inversion method by mixing a specific forward modeling approach with an approximate optimization inversion procedure. It can realize a joint inversion of underground horizontal displacement and vertical displacement for the proposed 3D sensor. Comparative studies have been conducted between the measured and inversed parameters of underground horizontal and vertical displacements under a variety of experimental and inverse conditions. The results showed that when experimentally measured horizontal displacements and vertical displacements are both varied within 0 ~ 30 mm, horizontal displacement and vertical displacement inversion discrepancies are generally less than 3 mm and 1 mm, respectively, under three kinds of simulated underground displacement monitoring circumstances. This implies that our proposed underground displacement joint inversion method is robust and efficient to predict the measuring values of underground horizontal and vertical displacements for the proposed sensor. PMID:25871714
Disposable soft 3 axis force sensor for biomedical applications.
Chathuranga, Damith Suresh; Zhongkui Wang; Yohan Noh; Nanayakkara, Thrishantha; Hirai, Shinichi
2015-08-01
This paper proposes a new disposable soft 3D force sensor that can be used to calculate either force or displacement and vibrations. It uses three Hall Effect sensors orthogonally placed around a cylindrical beam made of silicon rubber. A niobium permanent magnet is inside the silicon. When a force is applied to the end of the cylinder, it is compressed and bent to the opposite side of the force displacing the magnet. This displacement causes change in the magnetic flux around the ratiomatric linear sensors (Hall Effect sensors). By analysing these changes, we calculate the force or displacement in three directions using a lookup table. This sensor can be used in minimal invasive surgery and haptic feedback applications. The cheap construction, bio-compatibility and ease of miniaturization are few advantages of this sensor. The sensor design, and its characterization are presented in this work.
Capacitive Biosensors and Molecularly Imprinted Electrodes.
Ertürk, Gizem; Mattiasson, Bo
2017-02-17
Capacitive biosensors belong to the group of affinity biosensors that operate by registering direct binding between the sensor surface and the target molecule. This type of biosensors measures the changes in dielectric properties and/or thickness of the dielectric layer at the electrolyte/electrode interface. Capacitive biosensors have so far been successfully used for detection of proteins, nucleotides, heavy metals, saccharides, small organic molecules and microbial cells. In recent years, the microcontact imprinting method has been used to create very sensitive and selective biorecognition cavities on surfaces of capacitive electrodes. This chapter summarizes the principle and different applications of capacitive biosensors with an emphasis on microcontact imprinting method with its recent capacitive biosensor applications.
Review of Recent Inkjet-Printed Capacitive Tactile Sensors
Salim, Ahmed
2017-01-01
Inkjet printing is an advanced printing technology that has been used to develop conducting layers, interconnects and other features on a variety of substrates. It is an additive manufacturing process that offers cost-effective, lightweight designs and simplifies the fabrication process with little effort. There is hardly sufficient research on tactile sensors and inkjet printing. Advancements in materials science and inkjet printing greatly facilitate the realization of sophisticated tactile sensors. Starting from the concept of capacitive sensing, a brief comparison of printing techniques, the essential requirements of inkjet-printing and the attractive features of state-of-the art inkjet-printed tactile sensors developed on diverse substrates (paper, polymer, glass and textile) are presented in this comprehensive review. Recent trends in inkjet-printed wearable/flexible and foldable tactile sensors are evaluated, paving the way for future research. PMID:29125584
Tunable-Sensitivity flexible pressure sensor based on graphene transparent electrode
NASA Astrophysics Data System (ADS)
Luo, Shi; Yang, Jun; Song, Xuefen; Zhou, Xi; Yu, Leyong; Sun, Tai; Yu, Chongsheng; Huang, Deping; Du, Chunlei; Wei, Dapeng
2018-07-01
Tunable-sensitivity and flexibility are considered as two crucial characteristics for future pressure sensors or electronic skins. By the theoretical calculation model, we simulated the relationship curve between the sensitivity and PDMS pyramids with different spacings, and found that the spacing of pyramids is a main factor to affect the sensitivity of the capacitance pressure sensor. Furthermore, we fabricated the capacitance pressure sensors using graphene electrodes and the PDMS pyramid dielectric layers with different spacings. The measurement data were consistent with the simulation results that the sensitivity increases with the spacing of pyramids. In addition, graphene electrode exhibits prefect flexibility and reliability, while the ITO electrode would be destroyed rapidly after bending. These graphene pressure sensors exhibit the potential in the application in the wearable products for monitoring breath, pulse, and other physiological signals.
Guarded capacitance probes for measuring particle concentration and flow
Louge, M.Y.
1996-08-13
Guarded capacitance probe structures are constructed with guard electrodes surrounding one or more sensor electrodes and ground electrodes or grounded surfaces surrounding the guard electrodes. In a one sensor embodiment, the probe utilizes an apertured sensor electrode and the guard electrode both surrounds the sensor electrode and fills the aperture. This embodiment is particularly useful for measuring particle concentration in a fluid suspension contained within a vessel or pipe. The portion of the guard electrode within the aperture of the sensor electrode prevents electric field lines from emanating from the sensor electrode into the fluid suspension and toward infinity. A two sensor embodiment of the probe is useful for measuring flow velocities of fluid suspensions through cross correlation of the outputs generated by each sensor. The relative dimensions of the guard and sensor electrodes are selected to provide the most accurate measurements by confining the electric lines emanating from the sensor electrode or electrodes and terminating on the surrounding grounded surfaces to a small measurement volume of the fluid suspension near the vessel or pipe wall. 14 figs.
Guarded capacitance probes for measuring particle concentration and flow
Louge, M.Y.
1995-10-17
Guarded capacitance probe structures are constructed with guard electrodes surrounding one or more sensor electrodes and ground electrodes or grounded surfaces surrounding the guard electrodes. In a one sensor embodiment, the probe utilizes an apertured sensor electrode and the guard electrode both surrounds the sensor electrode and fills the aperture. This embodiment is particularly useful for measuring particle concentration in a fluid suspension contained within a vessel or pipe. The portion of the guard electrode within the aperture of the sensor electrode prevents electric field lines from emanating from the sensor electrode into the fluid suspension and toward infinity. A two sensor embodiment of the probe is useful for measuring flow velocities of fluid suspensions through cross correlation of the outputs generated by each sensor. The relative dimensions of the guard and sensor electrodes are selected to provide the most accurate measurements by confining the electric lines emanating from the sensor electrode or electrodes and terminating on the surrounding grounded surfaces to a small measurement volume of the fluid suspension near the vessel or pipe wall. 14 figs.
A Wireless, Passive Sensor for Quantifying Packaged Food Quality
Tan, Ee Lim; Ng, Wen Ni; Shao, Ranyuan; Pereles, Brandon D.; Ong, Keat Ghee
2007-01-01
This paper describes the fabrication of a wireless, passive sensor based on an inductive-capacitive resonant circuit, and its application for in situ monitoring of the quality of dry, packaged food such as cereals, and fried and baked snacks. The sensor is made of a planar inductor and capacitor printed on a paper substrate. To monitor food quality, the sensor is embedded inside the food package by adhering it to the package's inner wall; its response is remotely detected through a coil connected to a sensor reader. As food quality degrades due to increasing humidity inside the package, the paper substrate absorbs water vapor, changing the capacitor's capacitance and the sensor's resonant frequency. Therefore, the taste quality of the packaged food can be indirectly determined by measuring the change in the sensor's resonant frequency. The novelty of this sensor technology is its wireless and passive nature, which allows in situ determination of food quality. In addition, the simple fabrication process and inexpensive sensor material ensure a low sensor cost, thus making this technology economically viable. PMID:28903195
Guarded capacitance probes for measuring particle concentration and flow
Louge, Michel Y.
1995-01-01
Guarded capacitance probe structures are constructed with guard electrodes surrounding one or more sensor electrodes and ground electrodes or grounded surfaces surrounding the guard electrodes. In a one sensor embodiment, the probe utilizes an apertured sensor electrode and the guard electrode both surrounds the sensor electrode and fills the aperture. This embodiment is particularly useful for measuring particle concentration in a fluid suspension contained within a vessel or pipe. The portion of the guard electrode within the aperture of the sensor electrode prevents electric field lines from emanating from the sensor electrode into the fluid suspension and toward infinity. A two sensor embodiment of the probe is useful for measuring flow velocities of fluid suspensions through cross correlation of the outputs generated by each sensor. The relative dimensions of the guard and sensor electrodes are selected to provide the most accurate measurements by confining the electric lines emanating from the sensor electrode or electrodes and terminating on the surrounding grounded surfaces to a small measurement volume of the fluid suspension near the vessel or pipe wall.
Guarded capacitance probes for measuring particle concentration and flow
Louge, Michel Y.
1996-01-01
Guarded capacitance probe structures are constructed with guard electrodes surrounding one or more sensor electrodes and ground electrodes or grounded surfaces surrounding the guard electrodes. In a one sensor embodiment, the probe utilizes an apertured sensor electrode and the guard electrode both surrounds the sensor electrode and fills the aperture. This embodiment is particularly useful for measuring particle concentration in a fluid suspension contained within a vessel or pipe. The portion of the guard electrode within the aperture of the sensor electrode prevents electric field lines from emanating from the sensor electrode into the fluid suspension and toward infinity. A two sensor embodiment of the probe is useful for measuring flow velocities of fluid suspensions through cross correlation of the outputs generated by each sensor. The relative dimensions of the guard and sensor electrodes are selected to provide the most accurate measurements by confining the electric lines emanating from the sensor electrode or electrodes and terminating on the surrounding grounded surfaces to a small measurement volume of the fluid suspension near the vessel or pipe wall.
NASA Astrophysics Data System (ADS)
Grossman, Barry G.; Cosentino, Paul J.; Doi, Shinobu; Kumar, Girish; Verghese, John
1994-05-01
We are developing low cost, rugged, and reliable fiberoptic sensors to meet current and future needs in civil engineering, including those of smart civil structures. Our work has concentrated on load, pressure, and displacement sensors, including pore water pressure sensors. We have built and demonstrated sensors in the laboratory with loads up to 50 lb., water pressures of 100 psi, and displacements up to 1 mm. Repeatability of sensor measurements are within 5% and are being improved with continued development. The range and sensitivity of the sensors can be easily changed without changing the basic sensor design. We also have multiplexed two water pressure sensors on a single fiber. We describe the sensor construction and experimental performance.
Fiber-optic liquid level sensor
Weiss, Jonathan D.
1991-01-01
A fiber-optic liquid level sensor measures the height of a column of liquid through the hydrostatic pressure it produces. The sensor employs a fiber-optic displacement sensor to detect the pressure-induced displacement of the center of a corrugated diaphragm.
Radio frequency and capacitive sensors for dielectric characterization of low-conductivity media
NASA Astrophysics Data System (ADS)
Sheldon, Robert T.
Low-conductivity media are found in a vast number of applications, for example as electrical insulation or as the matrix polymer in high strength-to-weight ratio structural composites. In some applications, these materials are subjected to extreme environmental, thermal, and mechanical conditions that can affect the material's desired performance. In a more general sense, a medium may be comprised of one or more layers with unknown material properties that may affect the desired performance of the entire structure. It is often, therefore, of great import to be able to characterize the material properties of these media for the purpose of estimating their future performance in a certain application. Low-conductivity media, or dielectrics, are poor electrical conductors and permit electromagnetic waves and static electric fields to pass through with minimal attenuation. The amount of electrical energy that may be stored (and lost) in these fields depends directly upon the material property, permittivity, which is generally complex, frequency-dependent and has a measurable effect on sensors designed to characterize dielectric media. In this work, two different types of dielectric sensors: radio frequency resonant antennas and lower-frequency (<1 MHz) capacitive sensors, are designed for permittivity characterization in their respective frequency regimes. In the first part of this work, the capability of characterizing multilayer dielectric structures is studied using a patch antenna, a type of antenna that is primarily designed for data communications in the microwave bands but has application in the field of nondestructive evaluation as well. Each configuration of a patch antenna has a single lowest resonant (dominant mode) frequency that is dependent upon the antenna's substrate material and geometry as well as the permittivity and geometry of exterior materials. Here, an extant forward model is validated using well-characterized microwave samples and a new method of resonant frequency and quality factor determination from measured data is presented. Excellent agreement between calculated and measured values of sensor resonant frequency was obtained for the samples studied. Agreement between calculated and measured quality factor was good in some cases but incurred the particular challenge of accurately quantifying multiple contributions to loss from the sensor structure itself, which at times dominates the contribution due to the sample material. Two later chapters describe the development of capacitive sensors to quantify the low-frequency changes in material permittivity due to environmental aging mechanisms. One embodiment involves the application of coplanar concentric interdigital electrode sensors for the purpose of investigating polymer-matrix degradation in glass-fiber composites due to isothermal aging. Samples of bismaleimide-matrix glass-fiber composites were aged at several high temperatures to induce thermal degradation and capacitive sensors were used to measure the sensor capacitance and dissipation factor, parameters that are directly proportional to the real and imaginary components of complex permittivity, respectively. It was shown that real permittivity and dissipation factor decreased with increasing aging temperature, a trend that was common to both interdigital sensor measurements and standard parallel plate electrode measurements. The second piece of work involves the development of cylindrical interdigital electrode sensors to characterize complex permittivity changes in wire insulation due to aging-related degradation. The sensor was proven effective in detecting changes in irradiated nuclear power plant wiring insulation and in aircraft wiring insulation due to liquid chemical immersion. In all three cases, the results indicate a clear correlation of measured capacitance and dissipation factor with increased degradation.
Artificial sensory hairs based on the flow sensitive receptor hairs of crickets
NASA Astrophysics Data System (ADS)
Dijkstra, M.; van Baar, J. J.; Wiegerink, R. J.; Lammerink, T. S. J.; de Boer, J. H.; Krijnen, G. J. M.
2005-07-01
This paper presents the modelling, design, fabrication and characterization of flow sensors based on the wind-receptor hairs of crickets. Cricket sensory hairs are highly sensitive to drag-forces exerted on the hair shaft. Artificial sensory hairs have been realized in SU-8 on suspended SixNy membranes. The movement of the membranes is detected capacitively. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept.
Dual-mode self-validating resistance/Johnson noise thermometer system
Shepard, Robert L.; Blalock, Theron V.; Roberts, Michael J.
1993-01-01
A dual-mode Johnson noise and DC resistance thermometer capable of use in control systems where prompt indications of temperature changes and long term accuracy are needed. A resistance-inductance-capacitance (RLC) tuned circuit produces a continuous voltage signal for Johnson noise temperature measurement. The RLC circuit provides a mean-squared noise voltage that depends only on the capacitance used and the temperature of the sensor. The sensor has four leads for simultaneous coupling to a noise signal processor and to a DC resistance signal processor.
NASA Astrophysics Data System (ADS)
Ostasevicius, Vytautas; Malinauskas, Karolis; Janusas, Giedrius; Palevicius, Arvydas; Cekas, Elingas
2016-04-01
The aim of this paper is to develop and investigate MOEMS displacement-pressure sensor for biological information monitoring. Developing computational periodical microstructure models using COMSOL Multiphysics modeling software for modal and shape analysis and implementation of these results for design MOEMS displacement-pressure sensor for biological information monitoring was performed. The micro manufacturing technology of periodical microstructure having good diffraction efficiency was proposed. Experimental setup for characterisation of optical properties of periodical microstructure used for design of displacement-pressure sensor was created. Pulsating human artery dynamic characteristics in this paper were analysed.
Sensor system for web inspection
Sleefe, Gerard E.; Rudnick, Thomas J.; Novak, James L.
2002-01-01
A system for electrically measuring variations over a flexible web has a capacitive sensor including spaced electrically conductive, transmit and receive electrodes mounted on a flexible substrate. The sensor is held against a flexible web with sufficient force to deflect the path of the web, which moves relative to the sensor.
NASA Astrophysics Data System (ADS)
Jindal, Sumit Kumar; Mahajan, Ankush; Raghuwanshi, Sanjeev Kumar
2017-10-01
An analytical model and numerical simulation for the performance of MEMS capacitive pressure sensors in both normal and touch modes is required for expected behavior of the sensor prior to their fabrication. Obtaining such information should be based on a complete analysis of performance parameters such as deflection of diaphragm, change of capacitance when the diaphragm deflects, and sensitivity of the sensor. In the literature, limited work has been carried out on the above-stated issue; moreover, due to approximation factors of polynomials, a tolerance error cannot be overseen. Reliable before-fabrication forecasting requires exact mathematical calculation of the parameters involved. A second-order polynomial equation is calculated mathematically for key performance parameters of both modes. This eliminates the approximation factor, and an exact result can be studied, maintaining high accuracy. The elimination of approximation factors and an approach of exact results are based on a new design parameter (δ) that we propose. The design parameter gives an initial hint to the designers on how the sensor will behave once it is fabricated. The complete work is aided by extensive mathematical detailing of all the parameters involved. Next, we verified our claims using MATLAB® simulation. Since MATLAB® effectively provides the simulation theory for the design approach, more complicated finite element method is not used.
A flexible skin piloerection monitoring sensor
NASA Astrophysics Data System (ADS)
Kim, Jaemin; Seo, Dae Geon; Cho, Young-Ho
2014-06-01
We have designed, fabricated, and tested a capacitive-type flexible micro sensor for measurement of the human skin piloerection arisen from sudden emotional and environmental change. The present skin piloerection monitoring methods are limited in objective and quantitative measurement by physical disturbance stimulation to the skin due to bulky size and heavy weight of measuring devices. The proposed flexible skin piloerection monitoring sensor is composed of 3 × 3 spiral coplanar capacitor array using conductive polymer for having high capacitive density and thin enough thickness to be attached to human skin. The performance of the skin piloerection monitoring sensor is characterized using the artificial bump, representing human skin goosebump; thus, resulting in the sensitivity of -0.00252%/μm and the nonlinearity of 25.9% for the artificial goosebump deformation in the range of 0-326 μm. We also verified successive human skin piloerection having 3.5 s duration on the subject's dorsal forearms, thus resulting in the capacitance change of -6.2 fF and -9.2 fF for the piloerection intensity of 145 μm and 194 μm, respectively. It is demonstrated experimentally that the proposed sensor is capable to measure the human skin piloerection objectively and quantitatively, thereby suggesting the quantitative evaluation method of the qualitative human emotional status for cognitive human-machine interfaces applications.
Koo, Gunhee; Kim, Kiyoung; Chung, Jun Yeon; Choi, Jaemook; Kwon, Nam-Yeol; Kang, Doo-Young; Sohn, Hoon
2017-11-28
A displacement measurement system fusing a low cost real-time kinematic global positioning system (RTK-GPS) receiver and a force feedback accelerometer is proposed for infrastructure monitoring. The proposed system is composed of a sensor module, a base module and a computation module. The sensor module consists of a RTK-GPS rover and a force feedback accelerometer, and is installed on a target structure like conventional RTK-GPS sensors. The base module is placed on a rigid ground away from the target structure similar to conventional RTK-GPS bases, and transmits observation messages to the sensor module. Then, the initial acceleration, velocity and displacement responses measured by the sensor module are transmitted to the computation module located at a central monitoring facility. Finally, high precision and high sampling rate displacement, velocity, and acceleration are estimated by fusing the acceleration from the accelerometer, the velocity from the GPS rover, and the displacement from RTK-GPS. Note that the proposed displacement measurement system can measure 3-axis acceleration, velocity as well as displacement in real time. In terms of displacement, the proposed measurement system can estimate dynamic and pseudo-static displacement with a root-mean-square error of 2 mm and a sampling rate of up to 100 Hz. The performance of the proposed system is validated under sinusoidal, random and steady-state vibrations. Field tests were performed on the Yeongjong Grand Bridge and Yi Sun-sin Bridge in Korea, and the Xihoumen Bridge in China to compare the performance of the proposed system with a commercial RTK-GPS sensor and other data fusion techniques.
Methodology for the design, production, and test of plastic optical displacement sensors
NASA Astrophysics Data System (ADS)
Rahlves, Maik; Kelb, Christian; Reithmeier, Eduard; Roth, Bernhard
2016-08-01
Optical displacement sensors made entirely from plastic materials offer various advantages such as biocompatibility and high flexibility compared to their commonly used electrical and glass-based counterparts. In addition, various low-cost and large-scale fabrication techniques can potentially be utilized for their fabrication. In this work we present a toolkit for the design, production, and test of such sensors. Using the introduced methods, we demonstrate the development of a simple all-optical displacement sensor based on multimode plastic waveguides. The system consists of polymethylmethacrylate and cyclic olefin polymer which serve as cladding and core materials, respectively. We discuss several numerical models which are useful for the design and simulation of the displacement sensors as well as two manufacturing methods capable of mass-producing such devices. Prior to fabrication, the sensor layout and performance are evaluated by means of a self-implemented ray-optical simulation which can be extended to various other types of sensor concepts. Furthermore, we discuss optical and mechanical test procedures as well as a high-precision tensile testing machine especially suited for the characterization of the opto-mechanical performance of such plastic optical displacement sensors.
Sensors for measurement of moisture diffusion in power cables with oil-impregnated paper
NASA Astrophysics Data System (ADS)
Thomas, Z. M.; Zahn, M.; Yang, W.
2007-07-01
Some old power cables use oil-impregnated paper as the insulation material, which is enclosed by a layer of lead sheath. As cracks can form on the sheath of aged cables, the oil-impregnated paper can be exposed to the environmental conditions, and ambient moisture can diffuse into the paper through the cracks, causing a reduced breakdown voltage. To understand this diffusion phenomenon, multi-wavelength dielectrometry sensors have been used to measure permittivity and conductivity, aiming to obtain information on the moisture content. Different electrode-grouping strategies have been suggested to obtain more detailed information. Effectively, an electrode-grouping approach forms a type of electrical capacitance tomography sensor. This paper presents different sensor designs together with a capacitance measuring circuit. Some analytical results are also presented.
Evidence of an application of a variable MEMS capacitive sensor for detecting shunt occlusions
NASA Astrophysics Data System (ADS)
Apigo, David J.; Bartholomew, Philip L.; Russell, Thomas; Kanwal, Alokik; Farrow, Reginald C.; Thomas, Gordon A.
2017-04-01
A sensor was tested subdural and in vitro, simulating a supine infant with a ventricular-peritoneal shunt and controlled occlusions. The variable MEMS capacitive device is able to detect and forecast blockages, similar to early detection procedures in cancer patients. For example, with gradual occlusion development over a year, the method forecasts a danger over one month ahead of blockage. The method also distinguishes between ventricular and peritoneal occlusions. Because the sensor provides quantitative data on the dynamics of the cerebrospinal fluid, it can help test new therapies and work toward understanding hydrocephalus as well as idiopathic normal pressure hydrocephalus. The sensor appears to be a substantial advance in treating brain injuries treated with shunts and has the potential to bring significant impact in a clinical setting.
Mathematical calibration procedure of a capacitive sensor-based indexed metrology platform
NASA Astrophysics Data System (ADS)
Brau-Avila, A.; Santolaria, J.; Acero, R.; Valenzuela-Galvan, M.; Herrera-Jimenez, V. M.; Aguilar, J. J.
2017-03-01
The demand for faster and more reliable measuring tasks for the control and quality assurance of modern production systems has created new challenges for the field of coordinate metrology. Thus, the search for new solutions in coordinate metrology systems and the need for the development of existing ones still persists. One example of such a system is the portable coordinate measuring machine (PCMM), the use of which in industry has considerably increased in recent years, mostly due to its flexibility for accomplishing in-line measuring tasks as well as its reduced cost and operational advantages compared to traditional coordinate measuring machines. Nevertheless, PCMMs have a significant drawback derived from the techniques applied in the verification and optimization procedures of their kinematic parameters. These techniques are based on the capture of data with the measuring instrument from a calibrated gauge object, fixed successively in various positions so that most of the instrument measuring volume is covered, which results in time-consuming, tedious and expensive verification and optimization procedures. In this work the mathematical calibration procedure of a capacitive sensor-based indexed metrology platform (IMP) is presented. This calibration procedure is based on the readings and geometric features of six capacitive sensors and their targets with nanometer resolution. The final goal of the IMP calibration procedure is to optimize the geometric features of the capacitive sensors and their targets in order to use the optimized data in the verification procedures of PCMMs.
Liu, Shanliangzi; Sun, Xiaoda; Hildreth, Owen J; Rykaczewski, Konrad
2015-03-07
Room temperature liquid-metal microfluidic devices are attractive systems for hyperelastic strain sensing. These liquid-phase electronics are intrinsically soft and retain their functionality even when stretched to several times their original length. Currently two types of liquid metal-based strain sensors exist for in-plane measurements: single-microchannel resistive and two-microchannel capacitive devices. With a winding serpentine channel geometry, these sensors typically have a footprint of about a square centimeter. This large footprint of an individual device limits the number of sensors that can be embedded into, for example, electronic fabric or skin. In this work we introduce an alternative capacitor design consisting of two liquid metal electrodes separated by a liquid dielectric material within a single straight channel. Using a liquid insulator instead of a solid elastomer enables us to tailor the system's capacitance by selecting high or low dielectric constant liquids. We quantify the effects of the electrode geometry including the diameter, spacing, and meniscus shape as well as the dielectric constant of the insulating liquid on the overall system's capacitance. We also develop a procedure for fabricating the two-liquid capacitor within a single straight polydiemethylsiloxane channel and demonstrate that this device can have about 25 times higher capacitance per sensor's base area when compared to two-channel liquid metal capacitors. Lastly, we characterize the response of this compact device to strain and identify operational issues arising from complex hydrodynamics near liquid-liquid and liquid-elastomer interfaces.
Andrews, W.H. Jr.
1984-08-01
A capacitance measuring circuit is provided in which an unknown capacitance is measured by comparing the charge stored in the unknown capacitor with that stored in a known capacitance. Equal and opposite voltages are repetitively simultaneously switched onto the capacitors through an electronic switch driven by a pulse generator to charge the capacitors during the ''on'' portion of the cycle. The stored charge is compared by summing discharge currents flowing through matched resistors at the input of a current sensor during the ''off'' portion of the switching cycle. The net current measured is thus proportional to the difference in value of the two capacitances. The circuit is capable of providing much needed accuracy and stability to a great variety of capacitance-based measurement devices at a relatively low cost.
Interdigitated electrodes as impedance and capacitance biosensors: A review
NASA Astrophysics Data System (ADS)
Mazlan, N. S.; Ramli, M. M.; Abdullah, M. M. A. B.; Halin, D. S. C.; Isa, S. S. M.; Talip, L. F. A.; Danial, N. S.; Murad, S. A. Z.
2017-09-01
Interdigitated electrodes (IDEs) are made of two individually addressable interdigitated comb-like electrode structures. IDEs are one of the most favored transducers, widely utilized in technological applications especially in the field of biological and chemical sensors due to their inexpensive, ease of fabrication process and high sensitivity. In order to detect and analyze a biochemical molecule or analyte, the impedance and capacitance signal need to be obtained. This paper investigates the working principle and influencer of the impedance and capacitance biosensors. The impedance biosensor depends on the resistance and capacitance while the capacitance biosensor influenced by the dielectric permittivity. However, the geometry and structures of the interdigitated electrodes affect both impedance and capacitance biosensor. The details have been discussed in this paper.
H2 S Sensors: Fumarate-Based fcu-MOF Thin Film Grown on a Capacitive Interdigitated Electrode.
Yassine, Omar; Shekhah, Osama; Assen, Ayalew H; Belmabkhout, Youssef; Salama, Khaled N; Eddaoudi, Mohamed
2016-12-19
Herein we report the fabrication of an advanced sensor for the detection of hydrogen sulfide (H 2 S) at room temperature, using thin films of rare-earth metal (RE)-based metal-organic framework (MOF) with underlying fcu topology. This unique MOF-based sensor is made via the in situ growth of fumarate-based fcu-MOF (fum-fcu-MOF) thin film on a capacitive interdigitated electrode. The sensor showed a remarkable detection sensitivity for H 2 S at concentrations down to 100 ppb, with the lower detection limit around 5 ppb. The fum-fcu-MOF sensor exhibits a highly desirable detection selectivity towards H 2 S vs. CH 4 , NO 2 , H 2 , and C 7 H 8 as well as an outstanding H 2 S sensing stability as compared to other reported MOFs. © 2016 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.
NASA Technical Reports Server (NTRS)
Bahr, Joseph K. (Inventor); Johnson, Mont A. (Inventor)
2003-01-01
A displacement sensor for providing an indication of the position of a first body relative to a second body, the first body being displaceable relative to the second body in a displacement direction. The sensor is composed of: two magnets that are spaced from one another in the displacement direction to define therebetween a region containing a magnetic field; a magnetic field sensing element mounted in the region; and components for coupling at least one of the magnets to one of the bodies and the magnetic field sensing element to the other of the bodies to produce a relative displacement between the at least one magnet and the magnetic field sensing element in the displacement direction in response to displacement of the first body relative to the second body.
A Survey and Experimental Evaluation of Proximity Sensors for Space Robotics
NASA Technical Reports Server (NTRS)
Volpe, Richard
1993-01-01
This paper provides an overview of our selction process for proximity sensors for manipulator collison avoidance. Five categories of sensors have been considered for this use in space operations: Intensity of reflection, triangulation, time of flight, capacitive, and iductive.
Serrano, João M; Shahidian, Shakib; Marques da Silva, José Rafael
2016-02-01
Estimation of pasture productivity is an important step for the farmer in terms of planning animal stocking, organizing animal lots, and determining supplementary feeding needs throughout the year. The main objective of this work was to evaluate technologies which have potential for monitoring aspects related to spatial and temporal variability of pasture green and dry matter yield (respectively, GM and DM, in kg/ha) and support to decision making for the farmer. Two types of sensors were evaluated: an active optical sensor ("OptRx(®)," which measures the NDVI, "Normalized Difference Vegetation Index") and a capacitance probe ("GrassMaster II" which estimates plant mass). The results showed the potential of NDVI for monitoring the evolution of spatial and temporal patterns of vegetative growth of biodiverse pasture. Higher NDVI values were registered as pasture approached its greatest vegetative vigor, with a significant fall in the measured NDVI at the end of Spring, when the pasture began to dry due to the combination of higher temperatures and lower soil moisture content. This index was also effective for identifying different plant species (grasses/legumes) and variability in pasture yield. Furthermore, it was possible to develop calibration equations between the capacitance and the NDVI (R(2) = 0.757; p < 0.01), between capacitance and GM (R(2) = 0.799; p < 0.01), between capacitance and DM (R(2) =0.630; p < 0.01), between NDVI and GM (R(2) = 0.745; p < 0.01), and between capacitance and DM (R(2) = 0.524; p < 0.01). Finally, a direct relationship was obtained between NDVI and pasture moisture content (PMC, in %) and between capacitance and PMC (respectively, R(2) = 0.615; p < 0.01 and R(2) = 0.561; p < 0.01) in Alentejo dryland farming systems.
NASA Astrophysics Data System (ADS)
Reyes-Ramírez, B.; García-Segundo, C.; García-Valenzuela, A.
2014-05-01
We investigate theoretically and experimentally the performance of low-noise capacitive sensors based on polyvinylidene fluoride (PVDF) piezoelectric films to sense water-borne ultrasound signals for their use in photoacoustic tomography. We derive a mechanical-to-electrical transfer function of a piezoelectric capacitor sensor of infinite lateral dimensions and arbitrary thickness assuming that an ultrasound wave is normally incident. Then, we analyse the response for obliquely incident ultrasound waves on sensors of large but finite area and derive an expression for the angle dependence of the sensor's response. We also present experimental different measurements with home-made sensors and compare with our theoretical model. We present measurements of the sensors' response to harmonic signals of variable frequency in the range from 0.5 to 50 MHz and of the angular-dependence factor at 6 MHz. Additionally, because of the scope of interest in these kinds of sensors, we also tested the sensors' response for photoacoustic perturbations. These are generated by laser pulses from directly impinging on the sensor and from ultrasound perturbations produced on neoprene by the same kind of laser pulses and then travelling through water to the sensor.
Material approaches to stretchable strain sensors.
Park, Jaeyoon; You, Insang; Shin, Sangbaie; Jeong, Unyong
2015-04-27
With the recent progress made in wearable electronics, devices now require high flexibility and stretchability up to large strain levels (typically larger than 30 % strain). Wearable strain sensors or deformable strain sensors have been gaining increasing research interest because of the rapid development of electronic skins and robotics and because of their biomedical applications. Conventional brittle strain sensors made of metals and piezoresistors are not applicable for such stretchable sensors. This Review summarizes recent advances in stretchable sensors and focuses on material aspects for high stretchability and sensitivity. It begins with a brief introduction to the Wheatstone bridge circuit of conventional resistive strain sensors. Then, studies on the manipulation of materials are reviewed, including waved structural approaches for making metals and semiconductors stretchable, the use of liquid metals, and conductive filler/elastomer composites by using percolation among the fillers. For capacitive strain sensors, the constant conductivity of the electrode is a key factor in obtaining reliable sensors. Possible approaches to developing capacitive strain sensors are presented. This Review concludes with a discussion on the major challenges and perspectives related to stretchable strain sensors. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Capacitive Sensors for Feedback Control of Microfluidic Devices
NASA Astrophysics Data System (ADS)
Chen, J. Z.; Darhuber, A. A.; Troian, S. M.; Wagner, S.
2003-11-01
Automation of microfluidic devices based on thermocapillary flow [1] requires feedback control and detection techniques for monitoring the location, and ideally also composition and volume of liquid droplets. For this purpose we have developed a co-planar capacitance technique with a sensitivity of 0.07 pF at a frequency of 370 kHz. The variation in capacitance due to the presence of a droplet is monitored by the output frequency of an RC relaxation oscillator consisting of two inverters, one resistor and one capacitor. We discuss the performance of this coplanar sensor as a function of the electrode dimensions and geometry. These geometric variables determine the electric field penetration depth within the liquid, which in our studies ranged from 30 to 450 microns. Numerical solutions for the capacitance corresponding to the exact fabricated geometry agree very well with experimental data. An approximate analytic solution, which ignores fringe field effects, provides a simple but excellent guide for design development. [1] A. A. Darhuber et al., Appl. Phys. Lett. 82, 657 (2003).
Analysis of a Segmented Annular Coplanar Capacitive Tilt Sensor with Increased Sensitivity
Guo, Jiahao; Hu, Pengcheng; Tan, Jiubin
2016-01-01
An investigation of a segmented annular coplanar capacitor is presented. We focus on its theoretical model, and a mathematical expression of the capacitance value is derived by solving a Laplace equation with Hankel transform. The finite element method is employed to verify the analytical result. Different control parameters are discussed, and each contribution to the capacitance value of the capacitor is obtained. On this basis, we analyze and optimize the structure parameters of a segmented coplanar capacitive tilt sensor, and three models with different positions of the electrode gap are fabricated and tested. The experimental result shows that the model (whose electrode-gap position is 10 mm from the electrode center) realizes a high sensitivity: 0.129 pF/° with a non-linearity of <0.4% FS (full scale of ±40°). This finding offers plenty of opportunities for various measurement requirements in addition to achieving an optimized structure in practical design. PMID:26805844
NASA Astrophysics Data System (ADS)
Guo, Xiaohui; Huang, Ying; Cai, Xia; Liu, Caixia; Liu, Ping
2016-04-01
To achieve the wearable comfort of electronic skin (e-skin), a capacitive sensor printed on a flexible textile substrate with a carbon black (CB)/silicone rubber (SR) composite dielectric was demonstrated in this paper. Organo-silicone conductive silver adhesive serves as a flexible electrodes/shielding layer. The structure design, sensing mechanism and the influence of the conductive filler content and temperature variations on the sensor performance were investigated. The proposed device can effectively enhance the flexibility and comfort of wearing the device asthe sensing element has achieved a sensitivity of 0.02536%/KPa, a hysteresis error of 5.6%, and a dynamic response time of ~89 ms at the range of 0-700 KPa. The drift induced by temperature variations has been calibrated by presenting the temperature compensation model. The research on the time-space distribution of plantar pressure information and the experiment of the manipulator soft-grasping were implemented with the introduced device, and the experimental results indicate that the capacitive flexible textile tactile sensor has good stability and tactile perception capacity. This study provides a good candidate for wearable artificial skin.
Effect of Slice Error of Glass on Zero Offset of Capacitive Accelerometer
NASA Astrophysics Data System (ADS)
Hao, R.; Yu, H. J.; Zhou, W.; Peng, B.; Guo, J.
2018-03-01
Packaging process had been studied on capacitance accelerometer. The silicon-glass bonding process had been adopted on sensor chip and glass, and sensor chip and glass was adhered on ceramic substrate, the three-layer structure was curved due to the thermal mismatch, the slice error of glass lead to asymmetrical curve of sensor chip. Thus, the sensitive mass of accelerometer deviated along the sensitive direction, which was caused in zero offset drift. It was meaningful to confirm the influence of slice error of glass, the simulation results showed that the zero output drift was 12.3×10-3 m/s2 when the deviation was 40μm.
Dussoni, Simeone; Ceseracciu, Luca; Maggiali, Marco; Natale, Lorenzo; Metta, Giorgio; Athanassiou, Athanassia
2017-01-01
Abstract Stretchable capacitive devices are instrumental for new‐generation multifunctional haptic technologies particularly suited for soft robotics and electronic skin applications. A majority of elongating soft electronics still rely on silicone for building devices or sensors by multiple‐step replication. In this study, fabrication of a reliable elongating parallel‐plate capacitive touch sensor, using nitrile rubber gloves as templates, is demonstrated. Spray coating both sides of a rubber piece cut out of a glove with a conductive polymer suspension carrying dispersed carbon nanofibers (CnFs) or graphene nanoplatelets (GnPs) is sufficient for making electrodes with low sheet resistance values (≈10 Ω sq−1). The electrodes based on CnFs maintain their conductivity up to 100% elongation whereas the GnPs‐based ones form cracks before 60% elongation. However, both electrodes are reliable under elongation levels associated with human joints motility (≈20%). Strikingly, structural damages due to repeated elongation/recovery cycles could be healed through annealing. Haptic sensing characteristics of a stretchable capacitive device by wrapping it around the fingertip of a robotic hand (ICub) are demonstrated. Tactile forces as low as 0.03 N and as high as 5 N can be easily sensed by the device under elongation or over curvilinear surfaces. PMID:29619306
Li, Jian; Kong, Ming; Xu, Chuanlong; Wang, Shimin; Fan, Ying
2015-12-10
The online and continuous measurement of velocity, concentration and mass flow rate of pneumatically conveyed solid particles for the high-efficiency utilization of energy and raw materials has become increasingly significant. In this paper, an integrated instrumentation system for the velocity, concentration and mass flow rate measurement of dense phase pneumatically conveyed solid particles based on electrostatic and capacitance sensorsis developed. The electrostatic sensors are used for particle mean velocity measurement in combination with the cross-correlation technique, while the capacitance sensor with helical surface-plate electrodes, which has relatively homogeneous sensitivity distribution, is employed for the measurement of particle concentration and its capacitance is measured by an electrostatic-immune AC-based circuit. The solid mass flow rate can be further calculated from the measured velocity and concentration. The developed instrumentation system for velocity and concentration measurement is verified and calibrated on a pulley rig and through static experiments, respectively. Finally the system is evaluated with glass beads on a gravity-fed rig. The experimental results demonstrate that the system is capable of the accurate solid mass flow rate measurement, and the relative error is within -3%-8% for glass bead mass flow rates ranging from 0.13 kg/s to 0.9 kg/s.
Cataldi, Pietro; Dussoni, Simeone; Ceseracciu, Luca; Maggiali, Marco; Natale, Lorenzo; Metta, Giorgio; Athanassiou, Athanassia; Bayer, Ilker S
2018-02-01
Stretchable capacitive devices are instrumental for new-generation multifunctional haptic technologies particularly suited for soft robotics and electronic skin applications. A majority of elongating soft electronics still rely on silicone for building devices or sensors by multiple-step replication. In this study, fabrication of a reliable elongating parallel-plate capacitive touch sensor, using nitrile rubber gloves as templates, is demonstrated. Spray coating both sides of a rubber piece cut out of a glove with a conductive polymer suspension carrying dispersed carbon nanofibers (CnFs) or graphene nanoplatelets (GnPs) is sufficient for making electrodes with low sheet resistance values (≈10 Ω sq -1 ). The electrodes based on CnFs maintain their conductivity up to 100% elongation whereas the GnPs-based ones form cracks before 60% elongation. However, both electrodes are reliable under elongation levels associated with human joints motility (≈20%). Strikingly, structural damages due to repeated elongation/recovery cycles could be healed through annealing. Haptic sensing characteristics of a stretchable capacitive device by wrapping it around the fingertip of a robotic hand (ICub) are demonstrated. Tactile forces as low as 0.03 N and as high as 5 N can be easily sensed by the device under elongation or over curvilinear surfaces.
USDA-ARS?s Scientific Manuscript database
Many soil water sensors, especially those based on electromagnetic (EM) properties of soils, have been shown to be unsuitable in salt-affected or clayey soils. Most available soil water content sensors are of this EM type, particularly the so-called capacitance sensors. They often over estimate and ...
Fabrication and Evaluation of a Graphene Oxide-Based Capacitive Humidity Sensor.
Feng, Jinfeng; Kang, Xiaoxu; Zuo, Qingyun; Yuan, Chao; Wang, Weijun; Zhao, Yuhang; Zhu, Limin; Lu, Hanwei; Chen, Juying
2016-03-01
In this study, a CMOS compatible capacitive humidity sensor structure was designed and fabricated on a 200 mm CMOS BEOL Line. A top Al interconnect layer was used as an electrode with a comb/serpent structure, and graphene oxide (GO) was used as sensing material. XRD analysis was done which shows that GO sensing material has a strong and sharp (002) peak at about 10.278°, whereas graphite has (002) peak at about 26°. Device level CV and IV curves were measured in mini-environments at different relative humidity (RH) level, and saturated salt solutions were used to build these mini-environments. To evaluate the potential value of GO material in humidity sensor applications, a prototype humidity sensor was designed and fabricated by integrating the sensor with a dedicated readout ASIC and display/calibration module. Measurements in different mini-environments show that the GO-based humidity sensor has higher sensitivity, faster recovery time and good linearity performance. Compared with a standard humidity sensor, the measured RH data of our prototype humidity sensor can match well that of the standard product.
FDR Soil Moisture Sensor for Environmental Testing and Evaluation
NASA Astrophysics Data System (ADS)
Linmao, Ye; longqin, Xue; guangzhou, Zhang; haibo, Chen; likuai, Shi; zhigang, Wu; gouhe, Yu; yanbin, Wang; sujun, Niu; Jin, Ye; Qi, Jin
To test the affect of environmental stresses on a adaptability of soil moisture capacitance sensor(FDR) a number of stresses were induced including vibrational shock as well as temperature and humidity through the use of a CH-I constant humidity chamber with variable temperature. A Vibrational platform was used to exam the resistance and structural integrity of the sensor after vibrations simulating the process of using, transporting and handling the sensor. A Impactive trial platform was used to test the resistance and structural integrity of the sensor after enduring repeated mechanical shocks. An CH-I constant humidity chamber with high-low temperature was used to test the adaptability of sensor in different environments with high temperature, low temperature and constant humidity. Otherwise, scope of magnetic force line of sensor was also tested in this paper. Test show:the capacitance type soil moisture sensor spread a feeling machine to bear heat, high wet and low temperature, at bear impact and vibration experiment in pass an examination, is a kind of environment to adapt to ability very strong instrument;Spread a feeling machine moreover electric field strength function radius scope 7 cms.
NASA Technical Reports Server (NTRS)
Marshall, Paul; Reed, Robert; Fodness, Bryan; Jordan, Tom; Pickel, Jim; Xapsos, Michael; Burke, Ed
2004-01-01
This slide presentation examines motivation for Monte Carlo methods, charge deposition in sensor arrays, displacement damage calculations, and future work. The discussion of charge deposition sensor arrays includes Si active pixel sensor APS arrays and LWIR HgCdTe FPAs. The discussion of displacement damage calculations includes nonionizing energy loss (NIEL), HgCdTe NIEL calculation results including variance, and implications for damage in HgCdTe detector arrays.
Detection of ferromagnetic target based on mobile magnetic gradient tensor system
NASA Astrophysics Data System (ADS)
Gang, Y. I. N.; Yingtang, Zhang; Zhining, Li; Hongbo, Fan; Guoquan, Ren
2016-03-01
Attitude change of mobile magnetic gradient tensor system critically affects the precision of gradient measurements, thereby increasing ambiguity in target detection. This paper presents a rotational invariant-based method for locating and identifying ferromagnetic targets. Firstly, unit magnetic moment vector was derived based on the geometrical invariant, such that the intermediate eigenvector of the magnetic gradient tensor is perpendicular to the magnetic moment vector and the source-sensor displacement vector. Secondly, unit source-sensor displacement vector was derived based on the characteristic that the angle between magnetic moment vector and source-sensor displacement is a rotational invariant. By introducing a displacement vector between two measurement points, the magnetic moment vector and the source-sensor displacement vector were theoretically derived. To resolve the problem of measurement noises existing in the realistic detection applications, linear equations were formulated using invariants corresponding to several distinct measurement points and least square solution of magnetic moment vector and source-sensor displacement vector were obtained. Results of simulation and principal verification experiment showed the correctness of the analytical method, along with the practicability of the least square method.
Use of soil moisture sensors for irrigation scheduling
USDA-ARS?s Scientific Manuscript database
Various types of soil moisture sensing devices have been developed and are commercially available for water management applications. Each type of soil moisture sensors has its advantages and shortcomings in terms of accuracy, reliability, and cost. Resistive and capacitive based sensors, and time-d...
Study on the Ag Nanowire/PDMS Pressure Sensors with Three-Layer and Back-to-Back Structures
NASA Astrophysics Data System (ADS)
Wu, Jianhao; Lan, Qiuming; Yang, Weijia; He, Xin; Yue, Yunting; Jiang, Jiayi; Jiang, Tinghui
2018-01-01
Ag nanowire (NW)/polydimethylsiloxane (PDMS) pressure sensors with the three-layer and back-to-back structures were fabricated by a coating-peeling method. The bending and pressing responses of the sensors were comparably investigated. The results reveal that two kinds of pressure sensors show similar response linearity in the bending test with a bending angle of 0-180°. However, the response sensitivity of the three-layer structured pressure sensor is superior to that of the back-to-back structural one, which exhibits that the relationship between the capacitance value (Y) and the bending angle (X) is: Y = 0.01244X + 2.9763. On the contrary, in the pressing test, the response sensitivity of the back-to-back structural sensor is better than that of the three-layer structural one. The relationship between capacitance value (Y) and the number of paper clips (pressure, X2) is Y = 0.09241X2 + 88.03597.
A nondisturbing electric-field sensor using piezoelectric and converse piezoelectric resonances
NASA Astrophysics Data System (ADS)
Lee, Yongkwan; Kim, Ilryong; Lee, Soonchil
1997-12-01
An electric-field sensor was developed using both piezoelectric and converse piezoelectric resonances. Composed of no metallic parts, this probe minimizes field disturbance. The most distinguishing feature of this probe is that a signal is transmitted neither electrically nor optically, but mechanically. To demonstrate the field sensing capability of this probe, we measured both the capacitive and inductive fields inside empty and plasma-filled solenoidal coils. The result shows that the capacitive field is dominant in an empty solenoid, although it is almost completely shielded by inductively excited plasma.
Magnetic-Field-Response Measurement-Acquisition System
NASA Technical Reports Server (NTRS)
Woodward, Stanley E.; Shams, Qamar A.; Fox, Robert L.; Taylor, Bryant D.
2006-01-01
A measurement-acquisition system uses magnetic fields to power sensors and to acquire measurements from sensors. The system alleviates many shortcomings of traditional measurement-acquisition systems, which include a finite number of measurement channels, weight penalty associated with wires, use limited to a single type of measurement, wire degradation due to wear or chemical decay, and the logistics needed to add new sensors. Eliminating wiring for acquiring measurements can alleviate potential hazards associated with wires, such as damaged wires becoming ignition sources due to arcing. The sensors are designed as electrically passive inductive-capacitive or passive inductive-capacitive-resistive circuits that produce magnetic-field-responses. One or more electrical parameters (inductance, capacitance, and resistance) of each sensor can be variable and corresponds to a measured physical state of interest. The magnetic-field- response attributes (frequency, amplitude, and bandwidth) of the inductor correspond to the states of physical properties for which each sensor measures. For each sensor, the measurement-acquisition system produces a series of increasing magnetic-field harmonics within a frequency range dedicated to that sensor. For each harmonic, an antenna electrically coupled to an oscillating current (the frequency of which is that of the harmonic) produces an oscillating magnetic field. Faraday induction via the harmonic magnetic fields produces an electromotive force and therefore a current in the sensor. Once electrically active, the sensor produces its own harmonic magnetic field as the inductor stores and releases magnetic energy. The antenna of the measurement- acquisition system is switched from a transmitting to a receiving mode to acquire the magnetic-field response of the sensor. The rectified amplitude of the received response is compared to previous responses to prior transmitted harmonics, to ascertain if the measurement system has detected a response inflection. The "transmit-receive-compare" of sequential harmonics is repeated until the inflection is identified. The harmonic producing the amplitude inflection is the sensor resonant frequency. Resonant frequency and response amplitude are stored and then correlated to calibration data.
Fiber-optic couplers as displacement sensors
NASA Astrophysics Data System (ADS)
Baruch, Martin C.; Gerdt, David W.; Adkins, Charles M.
2003-04-01
We introduce the novel concept of using a fiber-optic coupler as a versatile displacement sensor. Comparatively long fiber-optic couplers, with a coupling region of approximately 10 mm, are manufactured using standard communication SM fiber and placed in a looped-back configuration. The result is a displacement sensor, which is robust and highly sensitive over a wide dynamic range. This displacement sensor resolves 1-2 μm over distances of 1-1.5 mm and is characterized by the essential absence of a 'spring constant' plaguing other strain gauge-type sensors. Consequently, it is possible to couple to extremely weak vibrations, such as the skin displacement affected by arterial heart beat pulsations. Used as a wrist-worn heartbeat monitor, the fidelity of the arterial pulse signal has been shown to be so high that it is possible to not only determine heartbeat and breathing rates, but to implement a new single-point blood pressure measurement scheme which does not squeeze the arm. In an application as a floor vibration sensor for the non-intrusive monitoring of independently living elderly, the sensor has been shown to resolve the distinct vibration spectra of different persons and different events.
Carr, Dustin W [Albuquerque, NM
2008-04-08
An optical displacement sensor is disclosed which uses a vertical-cavity surface-emitting laser (VCSEL) coupled to an optical cavity formed by a moveable membrane and an output mirror of the VCSEL. This arrangement renders the lasing characteristics of the VCSEL sensitive to any movement of the membrane produced by sound, vibrations, pressure changes, acceleration, etc. Some embodiments of the optical displacement sensor can further include a light-reflective diffractive lens located on the membrane or adjacent to the VCSEL to control the amount of lasing light coupled back into the VCSEL. A photodetector detects a portion of the lasing light from the VCSEL to provide an electrical output signal for the optical displacement sensor which varies with the movement of the membrane.
Design of a Capacitive Flexible Weighing Sensor for Vehicle WIM System
Cheng, Lu; Zhang, Hongjian; Li, Qing
2007-01-01
With the development of the Highway Transportation and Business Trade, vehicle weigh-in-motion (WIM) technology has become a key technology and trend of measuring traffic loads. In this paper, a novel capacitive flexible weighing sensor which is light weight, smaller volume and easy to carry was applied in the vehicle WIM system. The dynamic behavior of the sensor is modeled using the Maxwell-Kelvin model because the materials of the sensor are rubbers which belong to viscoelasticity. A signal processing method based on the model is presented to overcome effects of rubber mechanical properties on the dynamic weight signal. The results showed that the measurement error is less than ±10%. All the theoretic analysis and numerical results demonstrated that appliance of this system to weigh in motion is feasible and convenient for traffic inspection.
Hydrogen gas sensors using a thin Ta2O5 dielectric film
NASA Astrophysics Data System (ADS)
Kim, Seongjeen
2014-12-01
A capacitive-type hydrogen gas sensor with a MIS (metal-insulator-semiconductor) structure was investigated for high-temperature applications. In this work, a tantalum oxide (Ta2O5) layer of tens of nanometers in thickness formed by oxidizing tantalum film in rapid thermal processing (RTP) was exploited with the purpose of sensitivity improvement. Silicon carbide (SiC), which is good even at high temperatures over 500 °C, was used as the substrate. We fabricated sensors composed of Pd/Ta2O5/SiC, and the dependences of the capacitance response properties and the I-V characteristics on the hydrogen concentration were analyzed from the temperature range of room temperature to 500 °C. As a result, our hydrogen sensor showed promising performance with respect to the sensitivity and the adaptability at high temperature.
Embedded pitch adapters: A high-yield interconnection solution for strip sensors
NASA Astrophysics Data System (ADS)
Ullán, M.; Allport, P. P.; Baca, M.; Broughton, J.; Chisholm, A.; Nikolopoulos, K.; Pyatt, S.; Thomas, J. P.; Wilson, J. A.; Kierstead, J.; Kuczewski, P.; Lynn, D.; Hommels, L. B. A.; Fleta, C.; Fernandez-Tejero, J.; Quirion, D.; Bloch, I.; Díez, S.; Gregor, I. M.; Lohwasser, K.; Poley, L.; Tackmann, K.; Hauser, M.; Jakobs, K.; Kuehn, S.; Mahboubi, K.; Mori, R.; Parzefall, U.; Clark, A.; Ferrere, D.; Gonzalez Sevilla, S.; Ashby, J.; Blue, A.; Bates, R.; Buttar, C.; Doherty, F.; McMullen, T.; McEwan, F.; O'Shea, V.; Kamada, S.; Yamamura, K.; Ikegami, Y.; Nakamura, K.; Takubo, Y.; Unno, Y.; Takashima, R.; Chilingarov, A.; Fox, H.; Affolder, A. A.; Casse, G.; Dervan, P.; Forshaw, D.; Greenall, A.; Wonsak, S.; Wormald, M.; Cindro, V.; Kramberger, G.; Mandić, I.; Mikuž, M.; Gorelov, I.; Hoeferkamp, M.; Palni, P.; Seidel, S.; Taylor, A.; Toms, K.; Wang, R.; Hessey, N. P.; Valencic, N.; Hanagaki, K.; Dolezal, Z.; Kodys, P.; Bohm, J.; Mikestikova, M.; Bevan, A.; Beck, G.; Milke, C.; Domingo, M.; Fadeyev, V.; Galloway, Z.; Hibbard-Lubow, D.; Liang, Z.; Sadrozinski, H. F.-W.; Seiden, A.; To, K.; French, R.; Hodgson, P.; Marin-Reyes, H.; Parker, K.; Jinnouchi, O.; Hara, K.; Bernabeu, J.; Civera, J. V.; Garcia, C.; Lacasta, C.; Marti i Garcia, S.; Rodriguez, D.; Santoyo, D.; Solaz, C.; Soldevila, U.
2016-09-01
A proposal to fabricate large area strip sensors with integrated, or embedded, pitch adapters is presented for the End-cap part of the Inner Tracker in the ATLAS experiment. To implement the embedded pitch adapters, a second metal layer is used in the sensor fabrication, for signal routing to the ASICs. Sensors with different embedded pitch adapters have been fabricated in order to optimize the design and technology. Inter-strip capacitance, noise, pick-up, cross-talk, signal efficiency, and fabrication yield have been taken into account in their design and fabrication. Inter-strip capacitance tests taking into account all channel neighbors reveal the important differences between the various designs considered. These tests have been correlated with noise figures obtained in full assembled modules, showing that the tests performed on the bare sensors are a valid tool to estimate the final noise in the full module. The full modules have been subjected to test beam experiments in order to evaluate the incidence of cross-talk, pick-up, and signal loss. The detailed analysis shows no indication of cross-talk or pick-up as no additional hits can be observed in any channel not being hit by the beam above 170 mV threshold, and the signal in those channels is always below 1% of the signal recorded in the channel being hit, above 100 mV threshold. First results on irradiated mini-sensors with embedded pitch adapters do not show any change in the interstrip capacitance measurements with only the first neighbors connected.
NASA Technical Reports Server (NTRS)
Lucifredi, A. L.
1970-01-01
The theory, applications, and possible structural designs of capacitive transducers are presented. Emphasis is placed on the circuits used in connection with the sensors, such as AM, FM, resonant circuits, mode circuits, direct current circuits, and special circuits. Some criteria for selection of a design or the purchase of a commercial device are given.
A droplet-based passive force sensor for remote tactile sensing applications
NASA Astrophysics Data System (ADS)
Nie, Baoqing; Yao, Ting; Zhang, Yiqiu; Liu, Jian; Chen, Xinjian
2018-01-01
A droplet-based flexible wireless force sensor has been developed for remote tactile-sensing applications. By integration of a droplet-based capacitive sensing unit and two circular planar coils, this inductor-capacitor (LC) passive sensor offers a platform for the mechanical force detection in a wireless transmitting mode. Under external loads, the membrane surface of the sensor deforms the underlying elastic droplet uniformly, introducing a capacitance response in tens of picofarads. The LC circuit transduces the applied force into corresponding variations of its resonance frequency, which is detected by an external electromagnetic coupling coil. Specifically, the liquid droplet features a mechanosensitive plasticity, which results in an increased device sensitivity as high as 2.72 MHz N-1. The high dielectric property of the droplet endows our sensor with high tolerance for noise and large capacitance values (20-40 pF), the highest value in the literature for the LC passive devices in comparable dimensions. It achieves excellent reproducibility under periodical loads ranging from 0 to 1.56 N and temperature fluctuations ranging from 10 °C to 55 °C. As an interesting conceptual demonstration, the flexible device has been configured into a fingertip-amounted setting in a highly compact package (of 11 mm × 11 mm × 0.25 mm) for remote contact force sensing in the table tennis game.
Flexible Bond Wire Capacitive Strain Sensor for Vehicle Tyres.
Cao, Siyang; Pyatt, Simon; Anthony, Carl J; Kubba, Ammar I; Kubba, Ali E; Olatunbosun, Oluremi
2016-06-21
The safety of the driving experience and manoeuvrability of a vehicle can be improved by detecting the strain in tyres. To measure strain accurately in rubber, the strain sensor needs to be flexible so that it does not deform the medium that it is measuring. In this work, a novel flexible bond wire capacitive strain sensor for measuring the strain in tyres is developed, fabricated and calibrated. An array of 25 micron diameter wire bonds in an approximately 8 mm × 8 mm area is built to create an interdigitated structure, which consists of 50 wire loops resulting in 49 capacitor pairs in parallel. Laser machining was used to pattern copper on a flexible printed circuit board PCB to make the bond pads for the wire attachment. The wire array was finally packaged and embedded in polydimethylsiloxane (PDMS), which acts as the structural material that is strained. The capacitance of the device is in a linear like relationship with respect to the strain, which can measure the strain up to at least ±60,000 micro-strain (±6%) with a resolution of ~132 micro-strain (0.013%). In-tyre testing under static loading has shown the ability of the sensor to measure large tyre strains. The technology used for sensor fabrication lends itself to mass production and so the design is considered to be consistent with low cost commercialisable strain sensing technology.
NASA Technical Reports Server (NTRS)
Scardelletti, M. C.; Jordan, J. L.; Ponchak, G. E.; Zorman, C. A.
2015-01-01
This paper presents the design, fabrication and characterization of a wireless capacitive pressure sensor with directional RF chip antenna that is envisioned for the health monitoring of aircraft engines operating in harsh environments. The sensing system is characterized from room temperature (25 C) to 300 C for a pressure range from 0 to 100 psi. The wireless pressure system consists of a Clapp-type oscillator design with a capacitive MEMS pressure sensor located in the LC-tank circuit of the oscillator. Therefore, as the pressure of the aircraft engine changes, so does the output resonant frequency of the sensing system. A chip antenna is integrated to transmit the system output to a receive antenna 10 m away.The design frequency of the wireless pressure sensor is 127 MHz and a 2 increase in resonant frequency over the temperature range of 25 to 300 C from 0 to 100 psi is observed. The phase noise is less than minus 30 dBcHz at the 1 kHz offset and decreases to less than minus 80 dBcHz at 10 kHz over the entire temperature range. The RF radiation patterns for two cuts of the wireless system have been measured and show that the system is highly directional and the MEMS pressure sensor is extremely linear from 0 to 100 psi.
Flexible Bond Wire Capacitive Strain Sensor for Vehicle Tyres
Cao, Siyang; Pyatt, Simon; Anthony, Carl J.; Kubba, Ammar I.; Kubba, Ali E.; Olatunbosun, Oluremi
2016-01-01
The safety of the driving experience and manoeuvrability of a vehicle can be improved by detecting the strain in tyres. To measure strain accurately in rubber, the strain sensor needs to be flexible so that it does not deform the medium that it is measuring. In this work, a novel flexible bond wire capacitive strain sensor for measuring the strain in tyres is developed, fabricated and calibrated. An array of 25 micron diameter wire bonds in an approximately 8 mm × 8 mm area is built to create an interdigitated structure, which consists of 50 wire loops resulting in 49 capacitor pairs in parallel. Laser machining was used to pattern copper on a flexible printed circuit board PCB to make the bond pads for the wire attachment. The wire array was finally packaged and embedded in polydimethylsiloxane (PDMS), which acts as the structural material that is strained. The capacitance of the device is in a linear like relationship with respect to the strain, which can measure the strain up to at least ±60,000 micro-strain (±6%) with a resolution of ~132 micro-strain (0.013%). In-tyre testing under static loading has shown the ability of the sensor to measure large tyre strains. The technology used for sensor fabrication lends itself to mass production and so the design is considered to be consistent with low cost commercialisable strain sensing technology. PMID:27338402
A novel low profile wireless flow sensor to monitor hemodynamic changes in cerebral aneurysm
NASA Astrophysics Data System (ADS)
Chen, Yanfei; Jankowitz, Brian T.; Cho, Sung Kwon; Chun, Youngjae
2015-03-01
A proof of concept of low-profile flow sensor has been designed, fabricated, and subsequently tested to demonstrate its feasibility for monitoring hemodynamic changes in cerebral aneurysm. The prototype sensor contains three layers, i.e., a thin polyurethane layer was sandwiched between two sputter-deposited thin film nitinol layers (6μm thick). A novel superhydrophilic surface treatment was used to create hemocompatible surface of thin nitinol electrode layers. A finite element model was conducted using ANSYS Workbench 15.0 Static Structural to optimize the dimensions of flow sensor. A computational fluid dynamics calculations were performed using ANSYS Workbench Fluent to assess the flow velocity patterns within the aneurysm sac. We built a test platform with a z-axis translation stage and an S-beam load cell to compare the capacitance changes of the sensors with different parameters during deformation. Both LCR meter and oscilloscope were used to measure the capacitance and the resonant frequency shifts, respectively. The experimental compression tests demonstrated the linear relationship between the capacitance and applied compression force and decreasing the length, width and increasing the thickness improved the sensor sensitivity. The experimentally measured resonant frequency dropped from 12.7MHz to 12.48MHz, indicating a 0.22MHz shift with 200g ( 2N) compression force while the theoretical resonant frequency shifted 0.35MHz with 50g ( 0.5N). Our recent results demonstrated a feasibility of the low-profile flow sensor for monitoring haemodynamics in cerebral aneurysm region, as well as the efficacy of the use of the surface treated thin film nitinol for the low-profile sensor materials.
Development of an LSI for Tactile Sensor Systems on the Whole-Body of Robots
NASA Astrophysics Data System (ADS)
Muroyama, Masanori; Makihata, Mitsutoshi; Nakano, Yoshihiro; Matsuzaki, Sakae; Yamada, Hitoshi; Yamaguchi, Ui; Nakayama, Takahiro; Nonomura, Yutaka; Fujiyoshi, Motohiro; Tanaka, Shuji; Esashi, Masayoshi
We have developed a network type tactile sensor system, which realizes high-density tactile sensors on the whole-body of nursing and communication robots. The system consists of three kinds of nodes: host, relay and sensor nodes. Roles of the sensor node are to sense forces and, to encode the sensing data and to transmit the encoded data on serial channels by interruption handling. Relay nodes and host deal with a number of the encoded sensing data from the sensor nodes. A sensor node consists of a capacitive MEMS force sensor and a signal processing/transmission LSI. In this paper, details of an LSI for the sensor node are described. We designed experimental sensor node LSI chips by a commercial 0.18µm standard CMOS process. The 0.18µm LSIs were supplied in wafer level for MEMS post-process. The LSI chip area is 2.4mm × 2.4mm, which includes logic, CF converter and memory circuits. The maximum clock frequency of the chip with a large capacitive load is 10MHz. Measured power consumption at 10MHz clock is 2.23mW. Experimental results indicate that size, response time, sensor sensitivity and power consumption are all enough for practical tactile sensor systems.
0.5 V and 0.43 pJ/bit Capacitive Sensor Interface for Passive Wireless Sensor Systems
Beriain, Andoni; Gutierrez, Iñigo; Solar, Hector; Berenguer, Roc
2015-01-01
This paper presents an ultra low-power and low-voltage pulse-width modulation based ratiometric capacitive sensor interface. The interface was designed and fabricated in a standard 90 nm CMOS 1P9M technology. The measurements show an effective resolution of 10 bits using 0.5 V of supply voltage. The active occupied area is only 0.0045 mm2 and the Figure of Merit (FOM), which takes into account the energy required per conversion bit, is 0.43 pJ/bit. Furthermore, the results show low sensitivity to PVT variations due to the proposed ratiometric architecture. In addition, the sensor interface was connected to a commercial pressure transducer and the measurements of the resulting complete pressure sensor show a FOM of 0.226 pJ/bit with an effective linear resolution of 7.64 bits. The results validate the use of the proposed interface as part of a pressure sensor, and its low-power and low-voltage characteristics make it suitable for wireless sensor networks and low power consumer electronics. PMID:26343681
0.5 V and 0.43 pJ/bit Capacitive Sensor Interface for Passive Wireless Sensor Systems.
Beriain, Andoni; Gutierrez, Iñigo; Solar, Hector; Berenguer, Roc
2015-08-28
This paper presents an ultra low-power and low-voltage pulse-width modulation based ratiometric capacitive sensor interface. The interface was designed and fabricated in a standard 90 nm CMOS 1P9M technology. The measurements show an effective resolution of 10 bits using 0.5 V of supply voltage. The active occupied area is only 0.0045 mm2 and the Figure of Merit (FOM), which takes into account the energy required per conversion bit, is 0.43 pJ/bit. Furthermore, the results show low sensitivity to PVT variations due to the proposed ratiometric architecture. In addition, the sensor interface was connected to a commercial pressure transducer and the measurements of the resulting complete pressure sensor show a FOM of 0.226 pJ/bit with an effective linear resolution of 7.64 bits. The results validate the use of the proposed interface as part of a pressure sensor, and its low-power and low-voltage characteristics make it suitable for wireless sensor networks and low power consumer electronics.
NASA Astrophysics Data System (ADS)
Ma, Zhichao; Hu, Leilei; Zhao, Hongwei; Wu, Boda; Peng, Zhenxing; Zhou, Xiaoqin; Zhang, Hongguo; Zhu, Shuai; Xing, Lifeng; Hu, Huang
2010-08-01
The theories and techniques for improving machining accuracy via position control of diamond tool's tip and raising resolution of cutting depth on precise CNC lathes have been extremely focused on. A new piezo-driven ultra-precision machine tool servo system is designed and tested to improve manufacturing accuracy of workpiece. The mathematical model of machine tool servo system is established and the finite element analysis is carried out on parallel plate flexure hinges. The output position of diamond tool's tip driven by the machine tool servo system is tested via a contact capacitive displacement sensor. Proportional, integral, derivative (PID) feedback is also implemented to accommodate and compensate dynamical change owing cutting forces as well as the inherent non-linearity factors of the piezoelectric stack during cutting process. By closed loop feedback controlling strategy, the tracking error is limited to 0.8 μm. Experimental results have shown the proposed machine tool servo system could provide a tool positioning resolution of 12 nm, which is much accurate than the inherent CNC resolution magnitude. The stepped shaft of aluminum specimen with a step increment of cutting depth of 1 μm is tested, and the obtained contour illustrates the displacement command output from controller is accurately and real-time reflected on the machined part.
NASA Astrophysics Data System (ADS)
Mitani, Yusuke; Miyaji, Kousuke; Kaneko, Satoshi; Uekura, Takaharu; Momose, Hideya; Johguchi, Koh
2018-04-01
This paper presents a compact wearable perspiration meter system using a 180-nm CMOS technology. With custom chip and board design, the proposed perspiration meter, which can measure a qualitative sweating rate, is integrated into 15 × 20 mm2. From the experimental results, the capacitances of the humidity sensors with analog-to-digital converter and band-gap reference circuits can operate accurately without hysteresis. In addition, a demonstration with simulated human skin is carried out to investigate the sensor’s performance under real environments. The proposed perspiration meter can output values equivalent to a conventional meter. As a result, it is verified that the proposed system can be used as a human sweat sensor for wearable application.
A 3D Faraday Shield for Interdigitated Dielectrometry Sensors and Its Effect on Capacitance.
Risos, Alex; Long, Nicholas; Hunze, Arvid; Gouws, Gideon
2016-12-31
Interdigitated dielectrometry sensors (IDS) are capacitive sensors investigated to precisely measure the relative permittivity ( ϵ r ) of insulating liquids. Such liquids used in the power industry exhibit a change in ϵ r as they degrade. The IDS ability to measure ϵ r in-situ can potentially reduce maintenance, increase grid stability and improve safety. Noise from external electric field sources is a prominent issue with IDS. This paper investigates the novelty of applying a Faraday cage onto an IDS as a 3D shield to reduce this noise. This alters the spatially distributed electric field of an IDS affecting its sensing properties. Therefore, dependency of the sensor's signal with the distance to a shield above the IDS electrodes has been investigated experimentally and theoretically via a Green's function calculation and FEM. A criteria of the shield's distance s = s 0 has been defined as the distance which gives a capacitance for the IDS equal to 1 - e - 2 = 86.5 % of its unshielded value. Theoretical calculations using a simplified geometry gave a constant value for s 0 / λ = 1.65, where λ is the IDS wavelength. In the experiment, values for s 0 were found to be lower than predicted as from theory and the ratio s 0 / λ variable. This was analyzed in detail and it was found to be resulting from the specific spatial structure of the IDS. A subsequent measurement of a common insulating liquid with a nearby noise source demonstrates a considerable reduction in the standard deviation of the relative permittivity from σ unshielded = ± 9.5% to σ shielded = ± 0.6%. The presented findings enhance our understanding of IDS in respect to the influence of a Faraday shield on the capacitance, parasitic capacitances of the IDS and external noise impact on the measurement of ϵ r .
Wireless Measurement of Rotation and Displacement Rate
NASA Technical Reports Server (NTRS)
Woodard, Stanley E.; Taylor, Bryant D.
2007-01-01
A magnetic field response sensor is designed to measure displacement or rotation rate without a physical connection to a power source, microprocessor, data acquisition equipment, or electrical circuitry. The sensor works with the magnetic field response recorder, which was described in Magnetic-Field-Response Measurement-Acquisition System, NASA Tech Briefs, Vol. 30, No. 6 (June 2006), page 28. These sensors are wirelessly powered and interrogated, and the measurement acquisition system and sensors are extremely lightweight.The response recorder uses oscillating magnetic fields to power the sensors. Once powered, the sensors respond with their own magnetic field. For displacement/ rotation measurements, the response recorder uses the sensor s response amplitude, which is dependent on the distance from the antenna. The recorder s antenna orientation and position are kept fixed, and the sampling period is constant.
A Noncontact FMCW Radar Sensor for Displacement Measurement in Structural Health Monitoring
Li, Cunlong; Chen, Weimin; Liu, Gang; Yan, Rong; Xu, Hengyi; Qi, Yi
2015-01-01
This paper investigates the Frequency Modulation Continuous Wave (FMCW) radar sensor for multi-target displacement measurement in Structural Health Monitoring (SHM). The principle of three-dimensional (3-D) displacement measurement of civil infrastructures is analyzed. The requirements of high-accuracy displacement and multi-target identification for the measuring sensors are discussed. The fundamental measuring principle of FMCW radar is presented with rigorous mathematical formulas, and further the multiple-target displacement measurement is analyzed and simulated. In addition, a FMCW radar prototype is designed and fabricated based on an off-the-shelf radar frontend and data acquisition (DAQ) card, and the displacement error induced by phase asynchronism is analyzed. The conducted outdoor experiments verify the feasibility of this sensing method applied to multi-target displacement measurement, and experimental results show that three targets located at different distances can be distinguished simultaneously with millimeter level accuracy. PMID:25822139
A noncontact FMCW radar sensor for displacement measurement in structural health monitoring.
Li, Cunlong; Chen, Weimin; Liu, Gang; Yan, Rong; Xu, Hengyi; Qi, Yi
2015-03-26
This paper investigates the Frequency Modulation Continuous Wave (FMCW) radar sensor for multi-target displacement measurement in Structural Health Monitoring (SHM). The principle of three-dimensional (3-D) displacement measurement of civil infrastructures is analyzed. The requirements of high-accuracy displacement and multi-target identification for the measuring sensors are discussed. The fundamental measuring principle of FMCW radar is presented with rigorous mathematical formulas, and further the multiple-target displacement measurement is analyzed and simulated. In addition, a FMCW radar prototype is designed and fabricated based on an off-the-shelf radar frontend and data acquisition (DAQ) card, and the displacement error induced by phase asynchronism is analyzed. The conducted outdoor experiments verify the feasibility of this sensing method applied to multi-target displacement measurement, and experimental results show that three targets located at different distances can be distinguished simultaneously with millimeter level accuracy.
Nano-displacement sensor based on photonic crystal fiber modal interferometer.
Dash, Jitendra Narayan; Jha, Rajan; Villatoro, Joel; Dass, Sumit
2015-02-15
A stable nano-displacement sensor based on large mode area photonic crystal fiber (PCF) modal interferometer is presented. The compact setup requires simple splicing of a small piece of PCF with a single mode fiber (SMF). The excitation and recombination of modes is carried out in a single splice. The use of a reflecting target creates an extra cavity that discretizes the interference pattern of the mode interferometer, boosting the displacement resolution to nanometer level. The proposed modal interferometric based displacement sensor is highly stable and shows sensitivity of 32 pm/nm.
Siqueira, José R; Abouzar, Maryam H; Poghossian, Arshak; Zucolotto, Valtencir; Oliveira, Osvaldo N; Schöning, Michael J
2009-10-15
Silicon-based sensors incorporating biomolecules are advantageous for processing and possible biological recognition in a small, reliable and rugged manufactured device. In this study, we report on the functionalization of field-effect (bio-)chemical sensors with layer-by-layer (LbL) films containing single-walled carbon nanotubes (SWNTs) and polyamidoamine (PAMAM) dendrimers. A capacitive electrolyte-insulator-semiconductor (EIS) structure modified with carbon nanotubes (EIS-NT) was built, which could be used as a penicillin biosensor. From atomic force microscopy (AFM) and field-emission scanning electron microscopy (FESEM) images, the LbL films were shown to be highly porous due to interpenetration of SWNTs into the dendrimer layers. Capacitance-voltage (C/V) measurements pointed to a high pH sensitivity of ca. 55 mV/pH for the EIS-NT structures. The biosensing ability towards penicillin of an EIS-NT-penicillinase biosensor was also observed as the flat-band voltage shifted to lower potentials at different penicillin concentrations. A dynamic response of penicillin concentrations, ranging from 5.0 microM to 25 mM, was evaluated for an EIS-NT with the penicillinase enzyme immobilized onto the surfaces, via constant-capacitance (ConCap) measurements, achieving a sensitivity of ca. 116 mV/decade. The presence of the nanostructured PAMAM/SWNT LbL film led to sensors with higher sensitivity and better performance.
Performance limitations of a white light extrinsic Fabry-Perot interferometric displacement sensor
NASA Astrophysics Data System (ADS)
Moro, Erik A.; Todd, Michael D.; Puckett, Anthony D.
2012-06-01
Non-contacting interferometric fiber optic sensors offer a minimally invasive, high-accuracy means of measuring a structure's kinematic response to loading. The performance of interferometric sensors is often dictated by the technique employed for demodulating the kinematic measurand of interest from phase in the observed optical signal. In this paper a white-light extrinsic Fabry-Perot interferometer is implemented, offering robust displacement sensing performance. Displacement data is extracted from an estimate of the power spectral density, calculated from the interferometer's received optical power measured as a function of optical transmission frequency, and the sensor's performance is dictated by the details surrounding the implementation of this power spectral density estimation. One advantage of this particular type of interferometric sensor is that many of its control parameters (e.g., frequency range, frequency sampling density, sampling rate, etc.) may be chosen to so that the sensor satisfies application-specific performance needs in metrics such as bandwidth, axial displacement range, displacement resolution, and accuracy. A suite of user-controlled input values is investigated for estimating the spectrum of power versus wavelength data, and the relationships between performance metrics and input parameters are described in an effort to characterize the sensor's operational performance limitations. This work has been approved by Los Alamos National Laboratory for unlimited public release (LA-UR 12-01512).
Al-Ta’ii, Hassan Maktuff Jaber; Amin, Yusoff Mohd; Periasamy, Vengadesh
2016-01-01
Deoxyribonucleic acid or DNA based sensors, especially as humidity and alpha particle sensors have become quite popular in recent times due to flexible and highly optimizable nature of this fundamental biomaterial. Application of DNA electronics allow for more sensitive, accurate and effective sensors to be developed and fabricated. In this work, we examined the effect of different humidity conditions on the capacitive and resistive response of Aluminum (Al)/DNA/Al Schottky barrier structure when bombarded by time-dependent dosages of alpha particles. Based on current-voltage profiles, which demonstrated rectifying behaviours, Schottky diode parameters such as ideality factor, barrier height and series resistance was calculated. Results observed generally pointed towards a decrease in the resistance value from the pristine to the radiated structures. It was also demonstrated that under the effect of humidity, the capacitance of the DNA thin film increased from 0.05894 to 92.736 nF, with rising relative humidity level. We also observed the occurrence of the hypersensitivity phenomena after alpha irradiation between 2 to 4 min by observing a drop in the series resistance, crucial in the study of DNA damage and repair mechanisms. These observations may also suggest the exciting possibility of utilizing Al/DNA/Al Schottky diodes as potentially sensitive humidity sensors. PMID:27160654
NASA Astrophysics Data System (ADS)
Santos-Sacchi, Joseph
2018-05-01
Measures of membrane capacitance (Cm) can be used to assess important characteristics of voltage-dependent membrane proteins (e.g., channels and transporters). In particular, a protein's time-dependent voltage-sensor charge movement is equivalently represented as a frequency-dependent component of Cm, telling much about the kinetics of the protein's conformational behavior. Recently, we have explored the frequency dependence of OHC voltage-dependent capacitance (aka nonlinear capacitance, NLC) to query rates of conformational switching within prestin (SLC26a5), the cell's lateral membrane molecular motor 1. Following removal of confounding stray capacitance effects, high frequency Cm measures using wide-band stimuli accurately reveal unexpected low pass behavior in prestin's molecular motions.
NASA Astrophysics Data System (ADS)
Sahatiya, Parikshit; Badhulika, Sushmee
2017-03-01
This paper reports a new type of electronic, recoverable skin-like pressure and strain sensor, produced on a flexible, biodegradable pencil-eraser substrate and fabricated using a solvent-free, low-cost and energy efficient process. Multi-walled carbon nanotube (MWCNT) film, the strain sensing element, was patterned on pencil eraser with a rolling pin and a pre-compaction mechanical press. This induces high interfacial bonding between the MWCNTs and the eraser substrate, which enables the sensor to achieve recoverability under ambient conditions. The eraser serves as a substrate for strain sensing, as well as acting as a dielectric for capacitive pressure sensing, thereby eliminating the dielectric deposition step, which is crucial in capacitive-based pressure sensors. The strain sensing transduction mechanism is attributed to the tunneling effect, caused by the elastic behavior of the MWCNTs and the strong mechanical interlock between MWCNTs and the eraser substrate, which restricts slippage of MWCNTs on the eraser thereby minimizing hysteresis. The gauge factor of the strain sensor was calculated to be 2.4, which is comparable to and even better than most of the strain and pressure sensors fabricated with more complex designs and architectures. The sensitivity of the capacitive pressure sensor was found to be 0.135 MPa-1.To demonstrate the applicability of the sensor as artificial electronic skin, the sensor was assembled on various parts of the human body and corresponding movements and touch sensation were monitored. The entire fabrication process is scalable and can be integrated into large areas to map spatial pressure distributions. This low-cost, easily scalable MWCNT pin-rolled eraser-based pressure and strain sensor has huge potential in applications such as artificial e-skin in flexible electronics and medical diagnostics, in particular in surgery as it provides high spatial resolution without a complex nanostructure architecture.
Sahatiya, Parikshit; Badhulika, Sushmee
2017-03-03
This paper reports a new type of electronic, recoverable skin-like pressure and strain sensor, produced on a flexible, biodegradable pencil-eraser substrate and fabricated using a solvent-free, low-cost and energy efficient process. Multi-walled carbon nanotube (MWCNT) film, the strain sensing element, was patterned on pencil eraser with a rolling pin and a pre-compaction mechanical press. This induces high interfacial bonding between the MWCNTs and the eraser substrate, which enables the sensor to achieve recoverability under ambient conditions. The eraser serves as a substrate for strain sensing, as well as acting as a dielectric for capacitive pressure sensing, thereby eliminating the dielectric deposition step, which is crucial in capacitive-based pressure sensors. The strain sensing transduction mechanism is attributed to the tunneling effect, caused by the elastic behavior of the MWCNTs and the strong mechanical interlock between MWCNTs and the eraser substrate, which restricts slippage of MWCNTs on the eraser thereby minimizing hysteresis. The gauge factor of the strain sensor was calculated to be 2.4, which is comparable to and even better than most of the strain and pressure sensors fabricated with more complex designs and architectures. The sensitivity of the capacitive pressure sensor was found to be 0.135 MPa -1 .To demonstrate the applicability of the sensor as artificial electronic skin, the sensor was assembled on various parts of the human body and corresponding movements and touch sensation were monitored. The entire fabrication process is scalable and can be integrated into large areas to map spatial pressure distributions. This low-cost, easily scalable MWCNT pin-rolled eraser-based pressure and strain sensor has huge potential in applications such as artificial e-skin in flexible electronics and medical diagnostics, in particular in surgery as it provides high spatial resolution without a complex nanostructure architecture.
A linkage analysis toolkit for studying allosteric networks in ion channels
2013-01-01
A thermodynamic approach to studying allosterically regulated ion channels such as the large-conductance voltage- and Ca2+-dependent (BK) channel is presented, drawing from principles originally introduced to describe linkage phenomena in hemoglobin. In this paper, linkage between a principal channel component and secondary elements is derived from a four-state thermodynamic cycle. One set of parallel legs in the cycle describes the “work function,” or the free energy required to activate the principal component. The second are “lever operations” activating linked elements. The experimental embodiment of this linkage cycle is a plot of work function versus secondary force, whose asymptotes are a function of the parameters (displacements and interaction energies) of an allosteric network. Two essential work functions play a role in evaluating data from voltage-clamp experiments. The first is the conductance Hill energy WH[g], which is a “local” work function for pore activation, and is defined as kT times the Hill transform of the conductance (G-V) curve. The second is the electrical capacitance energy WC[q], representing “global” gating charge displacement, and is equal to the product of total gating charge per channel times the first moment (VM) of normalized capacitance (slope of Q-V curve). Plots of WH[g] and WC[q] versus voltage and Ca2+ potential can be used to measure thermodynamic parameters in a model-independent fashion of the core gating constituents (pore, voltage-sensor, and Ca2+-binding domain) of BK channel. The method is easily generalized for use in studying other allosterically regulated ion channels. The feasibility of performing linkage analysis from patch-clamp data were explored by simulating gating and ionic currents of a 17-particle model BK channel in response to a slow voltage ramp, which yielded interaction energies deviating from their given values in the range of 1.3 to 7.2%. PMID:23250867
NASA Astrophysics Data System (ADS)
Moreton, Gregory; Meydan, Turgut; Williams, Paul
2018-04-01
The usage of planar sensors is widespread due to their non-contact nature and small size profiles, however only a few basic design types are generally considered. In order to develop planar coil designs we have performed extensive finite element modelling (FEM) and experimentation to understand the performance of different planar sensor topologies when used in inductive sensing. We have applied this approach to develop a novel displacement sensor. Models of different topologies with varying pitch values have been analysed using the ANSYS Maxwell FEM package, furthermore the models incorporated a movable soft magnetic amorphous ribbon element. The different models used in the FEM were then constructed and experimentally tested with topologies that included mesh, meander, square coil, and circular coil configurations. The sensors were used to detect the displacement of the amorphous ribbon. A LabView program controlled both the displacement stage and the impedance analyser, the latter capturing the varying inductance values with ribbon displacement. There was good correlation between the FEM models and the experimental data confirming that the methodology described here offers an effective way for developing planar coil based sensors with improved performance.
Wireless Fluid Level Measuring System
NASA Technical Reports Server (NTRS)
Taylor, Bryant D. (Inventor); Woodard, Stanley E. (Inventor)
2007-01-01
A level-sensing probe positioned in a tank is divided into sections with each section including (i) a fluid-level capacitive sensor disposed along the length thereof, (ii) an inductor electrically coupled to the capacitive sensor, (iii) a sensor antenna positioned for inductive coupling to the inductor, and (iv) an electrical conductor coupled to the sensor antenna. An electrically non-conductive housing accessible from a position outside of the tank houses antennas arrayed in a pattern. Each antenna is electrically coupled to the electrical conductor from a corresponding one of the sections. A magnetic field response recorder has a measurement head with transceiving antennas arrayed therein to correspond to the pattern of the housing's antennas. When a measurement is to be taken, the measurement head is mechanically coupled to the housing so that each housing antenna is substantially aligned with a specific one of the transceiving antennas.
NASA Technical Reports Server (NTRS)
Pruzan, Daniel A.; Khatkhate, Ateen A.; Gerardi, Joseph J.; Hickman, Gail A.
1993-01-01
A reliable way to detect and measure ice accretion during flight is required to reduce the hazards of icing currently threatening present day aircraft. Many of the sensors used for this purpose are invasive (probe) sensors which must be placed in areas of the airframe where ice does not naturally form. Due to the difference in capture efficiency of the exposed surface, difficulties result in correlating the ice accretion on the probe to what is happening on a number of vastly different airfoil sections. Most flush mounted sensors in use must be integrated into the aircraft surface by cutting or drilling the aircraft surface. An alternate type of ice detector which is based on a NASA patent is currently being investigated at Innovative Dynamics, Inc. (IDI). Results of the investigation into the performance of different capacitive type sensor designs, both rigid as well as elastic, are presented.
Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
Yang, Ming-Zhi; Dai, Ching-Liang
2015-01-01
The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro-mechanical system (MEMS) technique are investigated. The ethanol sensor is made up of a heater, a sensitive film and interdigitated electrodes. The sensitive film is tin dioxide that is prepared by the sol-gel method. The heater is located under the interdigitated electrodes, and the sensitive film is coated on the interdigitated electrodes. The sensitive film needs a working temperature of 220 °C. The heater is employed to provide the working temperature of sensitive film. The sensor generates a change in capacitance when the sensitive film senses ethanol gas. A readout circuit is used to convert the capacitance variation of the sensor into the output frequency. Experiments show that the sensitivity of the ethanol sensor is 0.9 MHz/ppm. PMID:25594598
Ethanol microsensors with a readout circuit manufactured using the CMOS-MEMS technique.
Yang, Ming-Zhi; Dai, Ching-Liang
2015-01-14
The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro -mechanical system (MEMS) technique are investigated. The ethanol sensor is made up of a heater, a sensitive film and interdigitated electrodes. The sensitive film is tin dioxide that is prepared by the sol-gel method. The heater is located under the interdigitated electrodes, and the sensitive film is coated on the interdigitated electrodes. The sensitive film needs a working temperature of 220 °C. The heater is employed to provide the working temperature of sensitive film. The sensor generates a change in capacitance when the sensitive film senses ethanol gas. A readout circuit is used to convert the capacitance variation of the sensor into the output frequency. Experiments show that the sensitivity of the ethanol sensor is 0.9 MHz/ppm.
Yang, Ming-Zhi; Dai, Ching-Liang; Shih, Po-Jen
2014-07-17
This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive material, interdigitated electrodes and a polysilicon heater. The sensitive material is α-Fe2O3 synthesized by the hydrothermal method. The sensor requires a post-process to remove the sacrificial oxide layer between the interdigitated electrodes and to coat the α-Fe2O3 on the electrodes. When the sensitive material adsorbs acetone vapor, the sensor produces a change in capacitance. The ring oscillator circuit converts the capacitance of the sensor into the oscillation frequency output. The experimental results show that the output frequency of the acetone sensor changes from 128 to 100 MHz as the acetone concentration increases 1 to 70 ppm.
Yang, Ming-Zhi; Dai, Ching-Liang; Shih, Po-Jen
2014-01-01
This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive material, interdigitated electrodes and a polysilicon heater. The sensitive material is α-Fe2O3 synthesized by the hydrothermal method. The sensor requires a post-process to remove the sacrificial oxide layer between the interdigitated electrodes and to coat the α-Fe2O3 on the electrodes. When the sensitive material adsorbs acetone vapor, the sensor produces a change in capacitance. The ring oscillator circuit converts the capacitance of the sensor into the oscillation frequency output. The experimental results show that the output frequency of the acetone sensor changes from 128 to 100 MHz as the acetone concentration increases 1 to 70 ppm. PMID:25036331
USDA-ARS?s Scientific Manuscript database
Fisher’s linear discriminant (FLD) models for wheat variety classification were developed and validated. The inputs to the FLD models were the capacitance (C), impedance (Z), and phase angle ('), measured at two frequencies. Classification of wheat varieties was obtained as output of the FLD mod...
CMOS based capacitance to digital converter circuit for MEMS sensor
NASA Astrophysics Data System (ADS)
Rotake, D. R.; Darji, A. D.
2018-02-01
Most of the MEMS cantilever based system required costly instruments for characterization, processing and also has large experimental setups which led to non-portable device. So there is a need of low cost, highly sensitive, high speed and portable digital system. The proposed Capacitance to Digital Converter (CDC) interfacing circuit converts capacitance to digital domain which can be easily processed. Recent demand microcantilever deflection is part per trillion ranges which change the capacitance in 1-10 femto farad (fF) range. The entire CDC circuit is designed using CMOS 250nm technology. Design of CDC circuit consists of a D-latch and two oscillators, namely Sensor controlled oscillator (SCO) and digitally controlled oscillator (DCO). The D-latch is designed using transmission gate based MUX for power optimization. A CDC design of 7-stage, 9-stage and 11-stage tested for 1-18 fF and simulated using mentor graphics Eldo tool with parasitic. Since the proposed design does not use resistance component, the total power dissipation is reduced to 2.3621 mW for CDC designed using 9-stage SCO and DCO.
Packaged Capacitive Pressure Sensor System for Aircraft Engine Health Monitoring
NASA Technical Reports Server (NTRS)
Scardelletti, Maximilian C.; Zorman, Christian A.
2016-01-01
This paper describes the development of a packaged silicon carbide (SiC) based MEMS pressure sensor system designed specifically for a conventional turbofan engine. The electronic circuit is based on a Clapp-type oscillator that incorporates a 6H-SiC MESFET, a SiCN MEMS capacitive pressure sensor, titanate MIM capacitors, wirewound inductors, and thick film resistors. The pressure sensor serves as the capacitor in the LC tank circuit, thereby linking pressure to the resonant frequency of the oscillator. The oscillator and DC bias circuitry were fabricated on an alumina substrate and secured inside a metal housing. The packaged sensing system reliably operates at 0 to 350 psi and 25 to 540C. The system has a pressure sensitivity of 6.8 x 10E-2 MHzpsi. The packaged system shows negligible difference in frequency response between 25 and 400C. The fully packaged sensor passed standard benchtop acceptance tests and was evaluated on a flight-worthy engine.
Concentric Coplanar Capacitive Sensor System with Quantitative Model
NASA Technical Reports Server (NTRS)
Chen, Tianming (Inventor); Bowler, Nicola (Inventor)
2014-01-01
A concentric coplanar capacitive sensor includes a charged central disc forming a first electrode, an outer annular ring coplanar with and outer to the charged central disc, the outer annular ring forming a second electrode, and a gap between the charged central disc and the outer annular ring. The first electrode and the second electrode may be attached to an insulative film. A method provides for determining transcapacitance between the first electrode and the second electrode and using the transcapacitance in a model that accounts for a dielectric test piece to determine inversely the properties of the dielectric test piece.
NASA Astrophysics Data System (ADS)
Zafar, Qayyum; Azmer, Mohamad Izzat; Al-Sehemi, Abdullah G.; Al-Assiri, Mohammad S.; Kalam, Abul; Sulaiman, Khaulah
2016-07-01
In this study, we report the enhanced sensing parameters of previously reported TMBHPET-based humidity sensor. Significant improved sensing performance has been demonstrated by coupling of TMBHPET moisture sensing thin film with cobalt ferrite nanoparticles (synthesized by eco-benign ultrasonic method). The mean size of CoFe2O4 nanoparticles has been estimated to be 6.5 nm. It is assumed that the thin film of organic-ceramic hybrid matrix (TMBHPET:CoFe2O4) is a potential candidate for humidity sensing utility by virtue of its high specific surface area and porous surface morphology (as evident from TEM, FESEM, and AFM images). The hybrid suspension has been drop-cast onto the glass substrate with preliminary deposited coplanar aluminum electrodes separated by 40 µm distance. The influence of humidity on the capacitance of the hybrid humidity sensor (Al/TMBHPET:CoFe2O4/Al) has been investigated at three different frequencies of the AC applied voltage ( V rms 1 V): 100 Hz, 1 kHz, and 10 kHz. It has been observed that at 100 Hz, under a humidity of 99 % RH, the capacitance of the sensor increased by 2.61 times, with respect to 30 % RH condition. The proposed sensor exhibits significantly improved sensitivity 560 fF/ % RH at 100 Hz, which is nearly 7.5 times as high as that of pristine TMBHPET-based humidity sensor. Further, the capacitive sensor exhibits improved dynamic range (30-99 % RH), small hysteresis ( 2.3 %), and relatively quicker response and recovery times ( 12 s, 14 s, respectively). It is assumed that the humidity response of the sensor is associated with the diffusion kinetics of water vapors and doping of the semiconductor nanocomposite by water molecules.
NASA Astrophysics Data System (ADS)
Wei, Yang; Torah, Russel; Yang, Kai; Beeby, Steve; Tudor, John
2013-07-01
Free-standing cantilevers have been fabricated by screen printing sacrificial and structural layers onto a standard polyester cotton fabric. By printing additional conductive layers, a complete capacitive motion sensor on fabric using only screen printing has been fabricated. This type of free-standing structure cannot currently be fabricated using conventional fabric manufacturing processes. In addition, compared to conventional smart fabric fabrication processes (e.g. weaving and knitting), screen printing offers the advantages of geometric design flexibility and the ability to simultaneously print multiple devices of the same or different designs. Furthermore, a range of active inks exists from the printed electronics industry which can potentially be applied to create many types of smart fabric. Four cantilevers with different lengths have been printed on fabric using a five-layer structure with a sacrificial material underneath the cantilever. The sacrificial layer is subsequently removed at 160 °C for 30 min to achieve a freestanding cantilever above the fabric. Two silver electrodes, one on top of the cantilever and the other on top of the fabric, are used to capacitively detect the movement of the cantilever. In this way, an entirely printed motion sensor is produced on a standard fabric. The motion sensor was initially tested on an electromechanical shaker rig at a low frequency range to examine the linearity and the sensitivity of each design. Then, these sensors were individually attached to a moving human forearm to evaluate more representative results. A commercial accelerometer (Microstrain G-link) was mounted alongside for comparison. The printed sensors have a similar motion response to the commercial accelerometer, demonstrating the potential of a printed smart fabric motion sensor for use in intelligent clothing applications.
Distributed Capacitive Sensor for Sample Mass Measurement
NASA Technical Reports Server (NTRS)
Toda, Risaku; McKinney, Colin; Jackson, Shannon P.; Mojarradi, Mohammad; Manohara, Harish; Trebi-Ollennu, Ashitey
2011-01-01
Previous robotic sample return missions lacked in situ sample verification/ quantity measurement instruments. Therefore, the outcome of the mission remained unclear until spacecraft return. In situ sample verification systems such as this Distributed Capacitive (DisC) sensor would enable an unmanned spacecraft system to re-attempt the sample acquisition procedures until the capture of desired sample quantity is positively confirmed, thereby maximizing the prospect for scientific reward. The DisC device contains a 10-cm-diameter pressure-sensitive elastic membrane placed at the bottom of a sample canister. The membrane deforms under the weight of accumulating planetary sample. The membrane is positioned in close proximity to an opposing rigid substrate with a narrow gap. The deformation of the membrane makes the gap narrower, resulting in increased capacitance between the two parallel plates (elastic membrane and rigid substrate). C-V conversion circuits on a nearby PCB (printed circuit board) provide capacitance readout via LVDS (low-voltage differential signaling) interface. The capacitance method was chosen over other potential approaches such as the piezoelectric method because of its inherent temperature stability advantage. A reference capacitor and temperature sensor are embedded in the system to compensate for temperature effects. The pressure-sensitive membranes are aluminum 6061, stainless steel (SUS) 403, and metal-coated polyimide plates. The thicknesses of these membranes range from 250 to 500 m. The rigid substrate is made with a 1- to 2-mm-thick wafer of one of the following materials depending on the application requirements glass, silicon, polyimide, PCB substrate. The glass substrate is fabricated by a microelectromechanical systems (MEMS) fabrication approach. Several concentric electrode patterns are printed on the substrate. The initial gap between the two plates, 100 m, is defined by a silicon spacer ring that is anodically bonded to the glass substrate. The fabricated proof-of-concept devices have successfully demonstrated tens to hundreds of picofarads of capacitance change when a simulated sample (100 g to 500 g) is placed on the membrane.
Functionalized Ga2O3 nanowires as active material in room temperature capacitance-based gas sensors.
Mazeina, Lena; Perkins, F Keith; Bermudez, Victor M; Arnold, Stephen P; Prokes, S M
2010-08-17
We report the first evidence for functionalization of Ga(2)O(3) nanowires (NWs), which have been incorporated as the active material in room temperature capacitance gas-sensing devices. An adsorbed layer of pyruvic acid (PA) was successfully formed on Ga(2)O(3) NWs by simple room temperature vapor transport, which was confirmed by Fourier transform infrared spectroscopy. The effect of the adsorbed PA on the surface properties was demonstrated by the change in the response of the NW gas-sensing devices. Results indicate that the adsorption of PA reduced the sensitivity of the Ga(2)O(3) NW device to common hydrocarbons such as nitromethane and acetone while improving the response to triethylamine by an order of magnitude. Taking into account the simplicity of this functionalization together with the ease of producing these capacitance-based gas-sensing devices, this approach represents a viable technique for sensor development.
Capacitance-based damage detection sensing for aerospace structural composites
NASA Astrophysics Data System (ADS)
Bahrami, P.; Yamamoto, N.; Chen, Y.; Manohara, H.
2014-04-01
Damage detection technology needs improvement for aerospace engineering application because detection within complex composite structures is difficult yet critical to avoid catastrophic failure. Damage detection is challenging in aerospace structures because not all the damage detection technology can cover the various defect types (delamination, fiber fracture, matrix crack etc.), or conditions (visibility, crack length size, etc.). These defect states are expected to become even more complex with future introduction of novel composites including nano-/microparticle reinforcement. Currently, non-destructive evaluation (NDE) methods with X-ray, ultrasound, or eddy current have good resolutions (< 0.1 mm), but their detection capabilities is limited by defect locations and orientations and require massive inspection devices. System health monitoring (SHM) methods are often paired with NDE technologies to signal out sensed damage, but their data collection and analysis currently requires excessive wiring and complex signal analysis. Here, we present a capacitance sensor-based, structural defect detection technology with improved sensing capability. Thin dielectric polymer layer is integrated as part of the structure; the defect in the structure directly alters the sensing layer's capacitance, allowing full-coverage sensing capability independent of defect size, orientation or location. In this work, capacitance-based sensing capability was experimentally demonstrated with a 2D sensing layer consisting of a dielectric layer sandwiched by electrodes. These sensing layers were applied on substrate surfaces. Surface indentation damage (~1mm diameter) and its location were detected through measured capacitance changes: 1 to 250 % depending on the substrates. The damage detection sensors are light weight, and they can be conformably coated and can be part of the composite structure. Therefore it is suitable for aerospace structures such as cryogenic tanks and rocket fairings for example. The sensors can also be operating in space and harsh environment such as high temperature and vacuum.
Lee, Jin-Hyuk; Kim, Dae-Hyun
2014-10-01
A sensor of a biomimetic robot has to measure very small environmental changes such as, nanometer scale strains or displacements. Fiber optic sensor can be also one of candidates for the biomimetic sensor because the sensor is like thread and the shape of the sensor is similar to muscle fiber. A fiber optic interferometer, which is an optical-based sensor, can measure displacement precisely, so such device has been widely studied for the measurement of displacement on a nanometer-scale. Especially, a Quadrature Phase-Shifted Fiber Fabry-Pérot interferometer (QPS-FFPI) uses phase-information for this measurement, allowing it to provide a precision result with high resolution. In theory, the QPS-FFPI generates two sinusoidal signals of which the phase difference should be 90 degrees for the exact measurement of the displacement. In order to guarantee the condition of the phase difference, the relative adjustment of the cavities of the optical fibers is required. However, with such precise adjustment it is very hard to fix the proper difference of the two cavities for quadrature-phase-shifting. In this paper, a dual-cavity FFPI is newly proposed to measure the displacement on a nanometer-scale with a specific type of signal processing. In the signal processing, a novel phase-compensation algorithm is applied to force the phase difference to be exactly 90 degrees without any physical adjustment. As a result, the paper shows that the phase-compensated dual-cavity FFPI can effectively measure nanometer-scale displacement with high resolution under dynamic conditions.
2017-02-23
elements linked back-to- back for force and displacement detection, respectively. Experimental results indicate the sensor registers 2.1 and 5.3 mN force...feedback from the fat and muscle tissues of pig, respectively, when pressed to the tissues with the same 100 μm displacement . This difference of ∼2.5...back-to-back for force and displacement detection, respectively. Experimental results indicate the sensor registers 2.1 and 5.3 mN force feedback from
Noncontact Capacitive Clearance Control System For Laser Cutting Machines
NASA Astrophysics Data System (ADS)
Topkaya, Ahmet; Schmall, Karl-Heinz; Majoli, Ralf
1989-03-01
For a continuous high quality laser cut, it is necessary among other things to position the focal point of the laser beam correctly. This means that a constant clearance between the cutting head and the workpiece with a tolerance of +/- 0.Imm must he ensured. When cutting corrugated automobile bodysheet for example, a good quality cut can only be achieved with automatic clearance control. In the following, a method of automatic clearance control is described using the assistance of a noncontact capacitive sensor system. The copper nozzle of the laser cutting head acts as the electrode of the clearance sensor. The nozzle electrode and the workpiece build a small variable capacitance depending on the clearance. A change of clearance also changes the capacitance, which in turn influences a high frequency oscillator circuit. This shift in frequency is then converted into an analogue DC signal, which can be used to operate a servo motor control for the positioning of the laser cutting head in a closed loop servo system. Laser cutting heads with clearance sensor nozzles of different shapes, suited fur most applications in the industry, with focal lengths from 2.5" to 5" have been developed. They are capable to cut metal sheet from 0.2 to 12 mm of thickness, using CO2-lasers with output power up to 2.5 kW. For special applications involving difficult workpiece topographies in automobile production applications special "trunk" nozzles have been developed. For 5-axis cutting machines and robots, new laser cutting heads with integrated nozzle sensors in combination with a high dynamic Z-axis motor drive are in a stage of development.
NASA Technical Reports Server (NTRS)
Noffz, Gregory K.; Bowman, Michael P.
1996-01-01
Flight vehicles are typically instrumented with subsurface thermocouples to estimate heat transfer at the surface using inverse analysis procedures. If the vehicle has an ablating heat shield, however, temperature time histories from subsurface thermocouples no longer provide enough information to estimate heat flux at the surface. In this situation, the geometry changes and thermal energy leaves the surface in the form of ablation products. The ablation rate is required to estimate heat transfer to the surface. A new concept for a capacitive sensor has been developed to measure ablator depth using the ablator's dielectric effect on a capacitor's fringe region. Relying on the capacitor's fringe region enables the gage to be flush mounted in the vehicle's permanent structure and not intrude into the ablative heat shield applied over the gage. This sensor's design allows nonintrusive measurement of the thickness of dielectric materials, in particular, the recession rates of low-temperature ablators applied in thin (0.020 to 0.060 in. (0.05 to 0.15 mm)) layers. Twenty capacitive gages with 13 different sensing element geometries were designed, fabricated, and tested. A two-dimensional finite-element analysis was performed on several candidate geometries. Calibration procedures using ablator-simulating shims are described. A one-to-one correspondence between system output and dielectric material thickness was observed out to a thickness of 0.055 in. (1.4 mm) for a material with a permittivity about three times that of air or vacuum. A novel method of monitoring the change in sensor capacitance was developed. This technical memorandum suggests further improvements in gage design and fabrication techniques.
Bronder, Thomas S; Poghossian, Arshak; Scheja, Sabrina; Wu, Chunsheng; Keusgen, Michael; Mewes, Dieter; Schöning, Michael J
2015-09-16
Miniaturized setup, compatibility with advanced micro- and nanotechnologies, and ability to detect biomolecules by their intrinsic molecular charge favor the semiconductor field-effect platform as one of the most attractive approaches for the development of label-free DNA chips. In this work, a capacitive field-effect EIS (electrolyte-insulator-semiconductor) sensor covered with a layer-by-layer prepared, positively charged weak polyelectrolyte layer of PAH (poly(allylamine hydrochloride)) was used for the label-free electrical detection of DNA (deoxyribonucleic acid) immobilization and hybridization. The negatively charged probe single-stranded DNA (ssDNA) molecules were electrostatically adsorbed onto the positively charged PAH layer, resulting in a preferentially flat orientation of the ssDNA molecules within the Debye length, thus yielding a reduced charge-screening effect and a higher sensor signal. Each sensor-surface modification step (PAH adsorption, probe ssDNA immobilization, hybridization with complementary target DNA (cDNA), reducing an unspecific adsorption by a blocking agent, incubation with noncomplementary DNA (ncDNA) solution) was monitored by means of capacitance-voltage and constant-capacitance measurements. In addition, the surface morphology of the PAH layer was studied by atomic force microscopy and contact-angle measurements. High hybridization signals of 34 and 43 mV were recorded in low-ionic strength solutions of 10 and 1 mM, respectively. In contrast, a small signal of 4 mV was recorded in the case of unspecific adsorption of fully mismatched ncDNA. The density of probe ssDNA and dsDNA molecules as well as the hybridization efficiency was estimated using the experimentally measured DNA immobilization and hybridization signals and a simplified double-layer capacitor model. The results of field-effect experiments were supported by fluorescence measurements, verifying the DNA-immobilization and hybridization event.
Electrostatic capacitance and Faraday cage behavior of carbon nanotube forests
DOE Office of Scientific and Technical Information (OSTI.GOV)
Ya'akobovitz, A.; Department of Mechanical Engineering, Faculty of Engineering Sciences, Ben-Gurion University, Beer-Sheva; Bedewy, M.
2015-02-02
Understanding of the electrostatic properties of carbon nanotube (CNT) forests is essential to enable their integration in microelectronic and micromechanical devices. In this study, we sought to understand how the hierarchical geometry and morphology of CNT forests determines their capacitance. First, we find that at small gaps, solid micropillars have greater capacitance, yet at larger gaps the capacitance of the CNT forests is greater. The surface area of the CNT forest accessible to the electrostatic field was extracted by analysis of the measured capacitance, and, by relating the capacitance to the average density of CNTs in the forest, we findmore » that the penetration depth of the electrostatic field is on the order of several microns. Therefore, CNT forests can behave as a miniature Faraday cage. The unique electrostatic properties of CNT forests could therefore enable their use as long-range proximity sensors and as shielding elements for miniature electronic devices.« less
Studies on the Evaluation Methods for the Food Quality with a Non-contact type Capacitance Sensor.
NASA Astrophysics Data System (ADS)
Narumiya, Tadaoki; Hagura, Yoshio
Changes of capacitance and temperature of ethyl alcohol, hamburger and dough with cheese filling were measured with specially-made measuring devices during the freezing and thawing. The results of measurement of capacitance and temperature suggest a linear correlation for ethyl alcohol as a single constituent substance. The adequate correlation is too estimated from the results of food samples, though the capacitance of food sample varies greatly at the start and end of freezing and thawing process. It has been demonstrated that the quality or physical condition of food sample can be determined easily by the measurement of capacitance using the specially-made devices. Also the quality or physical condition of food can be determined easily by the non-contact and non-destructive measurements of capacitance. A variety application of the present technique is conceivable for the process control of the freezing and thawing foods.
Electrostatic capacitance and Faraday cage behavior of carbon nanotube forests
NASA Astrophysics Data System (ADS)
Ya'akobovitz, A.; Bedewy, M.; Hart, A. J.
2015-02-01
Understanding of the electrostatic properties of carbon nanotube (CNT) forests is essential to enable their integration in microelectronic and micromechanical devices. In this study, we sought to understand how the hierarchical geometry and morphology of CNT forests determines their capacitance. First, we find that at small gaps, solid micropillars have greater capacitance, yet at larger gaps the capacitance of the CNT forests is greater. The surface area of the CNT forest accessible to the electrostatic field was extracted by analysis of the measured capacitance, and, by relating the capacitance to the average density of CNTs in the forest, we find that the penetration depth of the electrostatic field is on the order of several microns. Therefore, CNT forests can behave as a miniature Faraday cage. The unique electrostatic properties of CNT forests could therefore enable their use as long-range proximity sensors and as shielding elements for miniature electronic devices.
Capacitive sensing of droplets for microfluidic devices based on thermocapillary actuation.
Chen, Jian Z; Darhuber, Anton A; Troian, Sandra M; Wagner, Sigurd
2004-10-01
The design and performance of a miniaturized coplanar capacitive sensor is presented whose electrode arrays can also function as resistive microheaters for thermocapillary actuation of liquid films and droplets. Optimal compromise between large capacitive signal and high spatial resolution is obtained for electrode widths comparable to the liquid film thickness measured, in agreement with supporting numerical simulations which include mutual capacitance effects. An interdigitated, variable width design, allowing for wider central electrodes, increases the capacitive signal for liquid structures with non-uniform height profiles. The capacitive resolution and time response of the current design is approximately 0.03 pF and 10 ms, respectively, which makes possible a number of sensing functions for nanoliter droplets. These include detection of droplet position, size, composition or percentage water uptake for hygroscopic liquids. Its rapid response time allows measurements of the rate of mass loss in evaporating droplets.
Moisture Determination of Nuts and Dry Fruits using a Capacitance Sensor
USDA-ARS?s Scientific Manuscript database
Impedance (Z), and phase angle (') of a cylindrical parallel-plate capacitor with in-shell peanuts between the plates was measured earlier, using a CI meter (Chari’s Impedance meter), at 1 and 5 MHz . Capacitance C, was derived from Z and ', and using the C, ', and Z values of a set of peanuts whos...
Non-destructive evaluation of laminated composite plates using dielectrometry sensors
NASA Astrophysics Data System (ADS)
Nassr, Amr A.; El-Dakhakhni, Wael W.
2009-05-01
The use of composite materials in marine, aerospace and automotive applications is increasing; however, several kinds of damages of composite materials may influence its durability and future applications. In this paper, a methodology was presented for damage detection of laminated composite plates using dielectrometry sensors. The presence of damage in the laminated composite plate leads to changes in its dielectric characteristics, causing variation in the measured capacitance by the sensors. An analytical model was used to analyse the influence of different sensor parameters on the output signals and to optimize sensor design. Two-dimensional finite element (FE) simulations were performed to assess the validity of the analytical results and to evaluate other sensor design-related parameters. To experimentally verify the model, the dielectric permittivity of the composite plate was measured. In addition, a glass fibre reinforced polymer (GFRP) laminated plate containing pre-fabricated slots through its thickness to simulate delamination and water intrusion defects was inspected in a laboratory setting. Excellent agreements were found between the experimental capacitance response signals and those predicated from the FE simulations. This cost-effective technique can be used for rapid damage screening, regular scheduled inspection, or as a permanent sensor network within the composite system.
Moghaddam, Maryam Kahali; Breede, Arne; Brauner, Christian; Lang, Walter
2015-03-27
The production of large and complex parts using fiber composite materials is costly due to the frequent formation of voids, porosity and waste products. By embedding different types of sensors and monitoring the process in real time, the amount of wastage can be significantly reduced. This work focuses on developing a knowledge-based method to improve and ensure complete impregnation of the fibers before initiation of the resin cure. Piezoresistive and capacitive pressure sensors were embedded in fiber composite laminates to measure the real-time the pressure values inside the laminate. A change of pressure indicates resin infusion. The sensors were placed in the laminate and the resin was infused by vacuum. The embedded piezoresistive pressure sensors were able to track the vacuum pressure in the fiber composite laminate setup, as well as the arrival of the resin at the sensor. The pressure increase due to closing the resin inlet was also measured. In contrast, the capacitive type of sensor was found to be inappropriate for measuring these quantities. The following study demonstrates real-time monitoring of pressure changes inside the fiber composite laminate, which validate the use of Darcy's law in porous media to control the resin flow during infusion.
Stretchable Dual-Capacitor Multi-Sensor for Touch-Curvature-Pressure-Strain Sensing.
Jin, Hanbyul; Jung, Sungchul; Kim, Junhyung; Heo, Sanghyun; Lim, Jaeik; Park, Wonsang; Chu, Hye Yong; Bien, Franklin; Park, Kibog
2017-09-07
We introduce a new type of multi-functional capacitive sensor that can sense several different external stimuli. It is fabricated only with polydimethylsiloxane (PDMS) films and silver nanowire electrodes by using selective oxygen plasma treatment method without photolithography and etching processes. Differently from the conventional single-capacitor multi-functional sensors, our new multi-functional sensor is composed of two vertically-stacked capacitors (dual-capacitor). The unique dual-capacitor structure can detect the type and strength of external stimuli including curvature, pressure, strain, and touch with clear distinction, and it can also detect the surface-normal directionality of curvature, pressure, and touch. Meanwhile, the conventional single-capacitor sensor has ambiguity in distinguishing curvature and pressure and it can detect only the strength of external stimulus. The type, directionality, and strength of external stimulus can be determined based on the relative capacitance changes of the two stacked capacitors. Additionally, the logical flow reflected on a tree structure with its branches reaching the direction and strength of the corresponding external stimulus unambiguously is devised. This logical flow can be readily implemented in the sensor driving circuit if the dual-capacitor sensor is commercialized actually in the future.
Displacement sensors using soft magnetostrictive alloys
NASA Astrophysics Data System (ADS)
Hristoforou, E.; Reilly, R. E.
1994-09-01
We report results on the response of a family of displacement sensors, which are based on the magentostrictive delay line (MDL) technique, using current conductors orthogonal to the MDL. Such sensing technique is based on the change of the magnetic circuit at the acoustic stress point of origin due to the displacement of a soft magnetic material above it. Integrated arrays of sensors can be obtained due to the acoustic delay line technique and they can be used as tactile arrays, digitizers or devices for medical applications (gait analysis etc.), while absence of hysteresis and low cost of manufacturing make them competent in this sector of sensor market.
Damage Detection/Locating System Providing Thermal Protection
NASA Technical Reports Server (NTRS)
Woodard, Stanley E. (Inventor); Jones, Thomas W. (Inventor); Taylor, Bryant D. (Inventor); Qamar, A. Shams (Inventor)
2010-01-01
A damage locating system also provides thermal protection. An array of sensors substantially tiles an area of interest. Each sensor is a reflective-surface conductor having operatively coupled inductance and capacitance. A magnetic field response recorder is provided to interrogate each sensor before and after a damage condition. Changes in response are indicative of damage and a corresponding location thereof.
NASA Technical Reports Server (NTRS)
Wolf, Michael
2012-01-01
A document describes an algorithm created to estimate the mass placed on a sample verification sensor (SVS) designed for lunar or planetary robotic sample return missions. A novel SVS measures the capacitance between a rigid bottom plate and an elastic top membrane in seven locations. As additional sample material (soil and/or small rocks) is placed on the top membrane, the deformation of the membrane increases the capacitance. The mass estimation algorithm addresses both the calibration of each SVS channel, and also addresses how to combine the capacitances read from each of the seven channels into a single mass estimate. The probabilistic approach combines the channels according to the variance observed during the training phase, and provides not only the mass estimate, but also a value for the certainty of the estimate. SVS capacitance data is collected for known masses under a wide variety of possible loading scenarios, though in all cases, the distribution of sample within the canister is expected to be approximately uniform. A capacitance-vs-mass curve is fitted to this data, and is subsequently used to determine the mass estimate for the single channel s capacitance reading during the measurement phase. This results in seven different mass estimates, one for each SVS channel. Moreover, the variance of the calibration data is used to place a Gaussian probability distribution function (pdf) around this mass estimate. To blend these seven estimates, the seven pdfs are combined into a single Gaussian distribution function, providing the final mean and variance of the estimate. This blending technique essentially takes the final estimate as an average of the estimates of the seven channels, weighted by the inverse of the channel s variance.
The Design and Characterization of a Prototype Wideband Voltage Sensor Based on a Resistive Divider
Garnacho, Fernando; Khamlichi, Abderrahim; Rovira, Jorge
2017-01-01
The most important advantage of voltage dividers over traditional voltage transformers is that voltage dividers do not have an iron core with non-linear hysteresis characteristics. The voltage dividers have a linear behavior with respect to over-voltages and a flat frequency response larger frequency range. The weak point of a voltage divider is the influence of external high-voltage (HV) and earth parts in its vicinity. Electrical fields arising from high voltages in neighboring phases and from ground conductors and structures are one of their main sources for systematic measurement errors. This paper describes a shielding voltage divider for a 24 kV medium voltage network insulated in SF6 composed of two resistive-capacitive dividers, one integrated within the other, achieving a flat frequency response up to 10 kHz for ratio error and up to 5 kHz for phase displacement error. The metal shielding improves its immunity against electric and magnetic fields. The characterization performed on the built-in voltage sensor shows an accuracy class of 0.2 for a frequency range from 20 Hz to 5 kHz and a class of 0.5 for 1 Hz up to 20 Hz. A low temperature effect is also achieved for operation conditions of MV power grids. PMID:29149085
The Design and Characterization of a Prototype Wideband Voltage Sensor Based on a Resistive Divider.
Garnacho, Fernando; Khamlichi, Abderrahim; Rovira, Jorge
2017-11-17
The most important advantage of voltage dividers over traditional voltage transformers is that voltage dividers do not have an iron core with non-linear hysteresis characteristics. The voltage dividers have a linear behavior with respect to over-voltages and a flat frequency response larger frequency range. The weak point of a voltage divider is the influence of external high-voltage (HV) and earth parts in its vicinity. Electrical fields arising from high voltages in neighboring phases and from ground conductors and structures are one of their main sources for systematic measurement errors. This paper describes a shielding voltage divider for a 24 kV medium voltage network insulated in SF6 composed of two resistive-capacitive dividers, one integrated within the other, achieving a flat frequency response up to 10 kHz for ratio error and up to 5 kHz for phase displacement error. The metal shielding improves its immunity against electric and magnetic fields. The characterization performed on the built-in voltage sensor shows an accuracy class of 0.2 for a frequency range from 20 Hz to 5 kHz and a class of 0.5 for 1 Hz up to 20 Hz. A low temperature effect is also achieved for operation conditions of MV power grids.
Analysis of Fluid Gauge Sensor for Zero or Microgravity Conditions using Finite Element Method
NASA Technical Reports Server (NTRS)
Deshpande, Manohar D.; Doiron, Terence a.
2007-01-01
In this paper the Finite Element Method (FEM) is presented for mass/volume gauging of a fluid in a tank subjected to zero or microgravity conditions. In this approach first mutual capacitances between electrodes embedded inside the tank are measured. Assuming the medium properties the mutual capacitances are also estimated using FEM approach. Using proper non-linear optimization the assumed properties are updated by minimizing the mean square error between estimated and measured capacitances values. Numerical results are presented to validate the present approach.
Chuang, Kuo-Chih; Liao, Heng-Tseng; Ma, Chien-Ching
2011-01-01
In this work, a fiber Bragg grating (FBG) sensing system which can measure the transient response of out-of-plane point-wise displacement responses is set up on a smart cantilever beam and the feasibility of its use as a feedback sensor in an active structural control system is studied experimentally. An FBG filter is employed in the proposed fiber sensing system to dynamically demodulate the responses obtained by the FBG displacement sensor with high sensitivity. For comparison, a laser Doppler vibrometer (LDV) is utilized simultaneously to verify displacement detection ability of the FBG sensing system. An optical full-field measurement technique called amplitude-fluctuation electronic speckle pattern interferometry (AF-ESPI) is used to provide full-field vibration mode shapes and resonant frequencies. To verify the dynamic demodulation performance of the FBG filter, a traditional FBG strain sensor calibrated with a strain gauge is first employed to measure the dynamic strain of impact-induced vibrations. Then, system identification of the smart cantilever beam is performed by FBG strain and displacement sensors. Finally, by employing a velocity feedback control algorithm, the feasibility of integrating the proposed FBG displacement sensing system in a collocated feedback system is investigated and excellent dynamic feedback performance is demonstrated. In conclusion, our experiments show that the FBG sensor is capable of performing dynamic displacement feedback and/or strain measurements with high sensitivity and resolution. PMID:22247683
Soenksen, L R; Kassis, T; Noh, M; Griffith, L G; Trumper, D L
2018-03-13
Precise fluid height sensing in open-channel microfluidics has long been a desirable feature for a wide range of applications. However, performing accurate measurements of the fluid level in small-scale reservoirs (<1 mL) has proven to be an elusive goal, especially if direct fluid-sensor contact needs to be avoided. In particular, gravity-driven systems used in several microfluidic applications to establish pressure gradients and impose flow remain open-loop and largely unmonitored due to these sensing limitations. Here we present an optimized self-shielded coplanar capacitive sensor design and automated control system to provide submillimeter fluid-height resolution (∼250 μm) and control of small-scale open reservoirs without the need for direct fluid contact. Results from testing and validation of our optimized sensor and system also suggest that accurate fluid height information can be used to robustly characterize, calibrate and dynamically control a range of microfluidic systems with complex pumping mechanisms, even in cell culture conditions. Capacitive sensing technology provides a scalable and cost-effective way to enable continuous monitoring and closed-loop feedback control of fluid volumes in small-scale gravity-dominated wells in a variety of microfluidic applications.
Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers
Royo, Guillermo; Sánchez-Azqueta, Carlos; Gimeno, Cecilia; Aldea, Concepción; Celma, Santiago
2016-01-01
In this work, we present a capacitance-to-voltage converter (CVC) for capacitive accelerometers based on microelectromechanical systems (MEMS). Based on a fully-differential transimpedance amplifier (TIA), it features a 34-dB transimpedance gain control and over one decade programmable bandwidth, from 75 kHz to 1.2 MHz. The TIA is aimed for low-cost low-power capacitive sensor applications. It has been designed in a standard 0.18-μm CMOS technology and its power consumption is only 54 μW. At the maximum transimpedance configuration, the TIA shows an equivalent input noise of 42 fA/Hz at 50 kHz, which corresponds to 100 μg/Hz. PMID:28042830
Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers.
Royo, Guillermo; Sánchez-Azqueta, Carlos; Gimeno, Cecilia; Aldea, Concepción; Celma, Santiago
2016-12-30
In this work, we present a capacitance-to-voltage converter (CVC) for capacitive accelerometers based on microelectromechanical systems (MEMS). Based on a fully-differential transimpedance amplifier (TIA), it features a 34-dB transimpedance gain control and over one decade programmable bandwidth, from 75 kHz to 1.2 MHz. The TIA is aimed for low-cost low-power capacitive sensor applications. It has been designed in a standard 0.18-μm CMOS technology and its power consumption is only 54 μW. At the maximum transimpedance configuration, the TIA shows an equivalent input noise of 42 fA/ Hz at 50 kHz, which corresponds to 100 μg/ Hz .
Sul, Onejae; Lee, Seung-Beck
2017-01-01
In this article, we report on a flexible sensor based on a sandpaper molded elastomer that simultaneously detects planar displacement, rotation angle, and vertical contact pressure. When displacement, rotation, and contact pressure are applied, the contact area between the translating top elastomer electrode and the stationary three bottom electrodes change characteristically depending on the movement, making it possible to distinguish between them. The sandpaper molded undulating surface of the elastomer reduces friction at the contact allowing the sensor not to affect the movement during measurement. The sensor showed a 0.25 mm−1 displacement sensitivity with a ±33 μm accuracy, a 0.027 degree−1 of rotation sensitivity with ~0.95 degree accuracy, and a 4.96 kP−1 of pressure sensitivity. For possible application to joint movement detection, we demonstrated that our sensor effectively detected the up-and-down motion of a human forefinger and the bending and straightening motion of a human arm. PMID:28878166
Choi, Eunsuk; Sul, Onejae; Lee, Seung-Beck
2017-09-06
In this article, we report on a flexible sensor based on a sandpaper molded elastomer that simultaneously detects planar displacement, rotation angle, and vertical contact pressure. When displacement, rotation, and contact pressure are applied, the contact area between the translating top elastomer electrode and the stationary three bottom electrodes change characteristically depending on the movement, making it possible to distinguish between them. The sandpaper molded undulating surface of the elastomer reduces friction at the contact allowing the sensor not to affect the movement during measurement. The sensor showed a 0.25 mm −1 displacement sensitivity with a ±33 μm accuracy, a 0.027 degree −1 of rotation sensitivity with ~0.95 degree accuracy, and a 4.96 kP −1 of pressure sensitivity. For possible application to joint movement detection, we demonstrated that our sensor effectively detected the up-and-down motion of a human forefinger and the bending and straightening motion of a human arm.
NASA Astrophysics Data System (ADS)
Windl, Roman; Abert, Claas; Bruckner, Florian; Huber, Christian; Vogler, Christoph; Weitensfelder, Herbert; Suess, Dieter
2017-11-01
Within this work a passive and wireless magnetic sensor, to monitor linear displacements, is proposed. We exploit recent advances in 3D printing and fabricate a polymer bonded magnet with a spatially linear magnetic field component corresponding to the length of the magnet. Regulating the magnetic compound fraction during printing allows specific shaping of the magnetic field distribution. A giant magnetoresistance magnetic field sensor is combined with a radio-frequency identification tag in order to passively monitor the exerted magnetic field of the printed magnet. Due to the tailored magnetic field, a displacement of the magnet with respect to the sensor can be detected within the sub-mm regime. The sensor design provides good flexibility by controlling the 3D printing process according to application needs. Absolute displacement detection using low cost components and providing passive operation, long term stability, and longevity renders the proposed sensor system ideal for structural health monitoring applications.
Abouzar, M H; Poghossian, A; Razavi, A; Williams, O A; Bijnens, N; Wagner, P; Schöning, M J
2009-01-01
The feasibility of a capacitive field-effect EDIS (electrolyte-diamond-insulator-semiconductor) platform for multi-parameter sensing is demonstrated by realising EDIS sensors with an O-terminated nanocrystalline-diamond (NCD) film as transducer material for the detection of pH and penicillin concentration as well as for the label-free electrical monitoring of adsorption and binding of charged macromolecules, like polyelectrolytes. The NCD films were grown on p-Si-SiO(2) substrates by microwave plasma-enhanced chemical vapour deposition. To obtain O-terminated surfaces, the NCD films were treated in an oxidising medium. The NCD-based field-effect sensors have been characterised by means of constant-capacitance method. The average pH sensitivity of the O-terminated NCD film was 40 mV/pH. A low detection limit of 5 microM and a high penicillin G sensitivity of 65-70 mV/decade has been obtained for an EDIS penicillin biosensor with the adsorptively immobilised enzyme penicillinase. Alternating potential changes, having tendency to decrease with increasing the number of adsorbed polyelectrolyte layers, have been observed after the layer-by-layer deposition of polyelectrolyte multilayers, using positively charged PAH (poly (allylamine hydrochloride)) and a negatively charged PSS (poly (sodium 4-styrene sulfonate)) as a model system. The response mechanism of the developed EDIS sensors is discussed.
Pang, Jie; Zhang, Ziping; Jin, Haizhu
2016-03-15
Electrochemical aptamer-based (E-AB) sensors employing electrode-immobilized, redox-tagged aptamer probes have emerged as a promising platform for the sensitive and quick detection of target analytes ranging from small molecules to proteins. Signal generation in this class of sensor is linked to change in electron transfer efficiency upon binding-induced change in flexibility/conformation of the aptamer probe. Because of this signaling mechanism, signal gains of these sensors can be improved by employing a displacement-based recognition system, which links target binding with a large-scale flexibility/conformation shift from the aptamer-DNA duplex to the single-stranded DNA or the native aptamer. Despite the relatively large number of displacement-based E-AB sensor samples, little attention has been paid to the structure variation of the aptamer-DNA duplex probe. Here we detail the effects of complementary length and position of the aptamer-DNA duplex probe on the performance of a model displacement-based E-AB sensor for ATP. We find that, greater background suppression and signal gain are observed with longer complementary length of the aptamer-DNA duplex probe. However, sensor equilibration time slows monotonically with increasing complementary length; and with too many target binding sites in aptamer sequence being occupied by the complementary DNA, the aptamer-target binding does not occur and no signal gain observed. We also demonstrate that signal gain of the displacement-based E-AB sensor is strongly dependent on the complementary position of the aptamer-DNA duplex probe, with complementary position located at the electrode-attached or redox-tagged end of the duplex probe, larger background suppression and signal increase than that of the middle position are observed. These results highlight the importance of rational structure design of the aptamer-DNA duplex probe and provide new insights into the optimization of displacement-based E-AB sensors. Copyright © 2015 Elsevier B.V. All rights reserved.
NASA Technical Reports Server (NTRS)
Dix, M. G.; Harrison, D. R.; Edwards, T. M.
1982-01-01
Bubble vial with external aluminum-foil electrodes is sensing element for simple indicating tiltmeter. To measure bubble displacement, bridge circuit detects difference in capacitance between two sensing electrodes and reference electrode. Tiltmeter was developed for experiment on forecasting seismic events by changes in Earth's magnetic field.
A magnetostrictive acceleration sensor for registration of chest wall displacements
NASA Astrophysics Data System (ADS)
Kaniusas, E.; Mehnen, L.; Krell, C.; Pfützner, H.
2000-06-01
The present study concerns a novel acceleration sensor built up using a bimetallic strip with one freely oscillating end. The strip consists of a magnetostrictive amorphous ribbon glued on a nonmagnetic metal ribbon. The sensor's effectiveness is demonstrated for the case of chest wall displacements as resulting from cardiorespiratory activity. The cheap and easy-to-handle novel sensor offers multiple information on the so-called sleep apnea syndrome.
Avoiding space robot collisions utilizing the NASA/GSFC tri-mode skin sensor
NASA Technical Reports Server (NTRS)
Prinz, F. B.
1991-01-01
Sensor based robot motion planning research has primarily focused on mobile robots. Consider, however, the case of a robot manipulator expected to operate autonomously in a dynamic environment where unexpected collisions can occur with many parts of the robot. Only a sensor based system capable of generating collision free paths would be acceptable in such situations. Recently, work in this area has been reported in which a deterministic solution for 2DOF systems has been generated. The arm was sensitized with 'skin' of infra-red sensors. We have proposed a heuristic (potential field based) methodology for redundant robots with large DOF's. The key concepts are solving the path planning problem by cooperating global and local planning modules, the use of complete information from the sensors and partial (but appropriate) information from a world model, representation of objects with hyper-ellipsoids in the world model, and the use of variational planning. We intend to sensitize the robot arm with a 'skin' of capacitive proximity sensors. These sensors were developed at NASA, and are exceptionally suited for the space application. In the first part of the report, we discuss the development and modeling of the capacitive proximity sensor. In the second part we discuss the motion planning algorithm.
Wireless Sensing System Using Open-circuit, Electrically-conductive Spiral-trace Sensor
NASA Technical Reports Server (NTRS)
Woodard, Stanley E. (Inventor); Taylor, Bryant D. (Inventor)
2013-01-01
A wireless sensing system includes a sensor made from an electrical conductor shaped to form an open-circuit, electrically-conductive spiral trace having inductance and capacitance. In the presence of a time-varying magnetic field, the sensor resonates to generate a harmonic response having a frequency, amplitude and bandwidth. A magnetic field response recorder wirelessly transmits the time-varying magnetic field to the sensor and wirelessly detects the sensor's response frequency, amplitude and bandwidth.
Low-Cost Soil Moisture Profile Probe Using Thin-Film Capacitors and a Capacitive Touch Sensor.
Kojima, Yuki; Shigeta, Ryo; Miyamoto, Naoya; Shirahama, Yasutomo; Nishioka, Kazuhiro; Mizoguchi, Masaru; Kawahara, Yoshihiro
2016-08-15
Soil moisture is an important property for agriculture, but currently commercialized soil moisture sensors are too expensive for many farmers. The objective of this study is to develop a low-cost soil moisture sensor using capacitors on a film substrate and a capacitive touch integrated circuit. The performance of the sensor was evaluated in two field experiments: a grape field and a mizuna greenhouse field. The developed sensor captured dynamic changes in soil moisture at 10, 20, and 30 cm depth, with a period of 10-14 days required after sensor installation for the contact between capacitors and soil to settle down. The measured soil moisture showed the influence of individual sensor differences, and the influence masked minor differences of less than 0.05 m³·m(-3) in the soil moisture at different locations. However, the developed sensor could detect large differences of more than 0.05 m³·m(-3), as well as the different magnitude of changes, in soil moisture. The price of the developed sensor was reduced to 300 U.S. dollars and can be reduced even more by further improvements suggested in this study and by mass production. Therefore, the developed sensor will be made more affordable to farmers as it requires low financial investment, and it can be utilized for decision-making in irrigation.
Low-Cost Soil Moisture Profile Probe Using Thin-Film Capacitors and a Capacitive Touch Sensor
Kojima, Yuki; Shigeta, Ryo; Miyamoto, Naoya; Shirahama, Yasutomo; Nishioka, Kazuhiro; Mizoguchi, Masaru; Kawahara, Yoshihiro
2016-01-01
Soil moisture is an important property for agriculture, but currently commercialized soil moisture sensors are too expensive for many farmers. The objective of this study is to develop a low-cost soil moisture sensor using capacitors on a film substrate and a capacitive touch integrated circuit. The performance of the sensor was evaluated in two field experiments: a grape field and a mizuna greenhouse field. The developed sensor captured dynamic changes in soil moisture at 10, 20, and 30 cm depth, with a period of 10–14 days required after sensor installation for the contact between capacitors and soil to settle down. The measured soil moisture showed the influence of individual sensor differences, and the influence masked minor differences of less than 0.05 m3·m−3 in the soil moisture at different locations. However, the developed sensor could detect large differences of more than 0.05 m3·m−3, as well as the different magnitude of changes, in soil moisture. The price of the developed sensor was reduced to 300 U.S. dollars and can be reduced even more by further improvements suggested in this study and by mass production. Therefore, the developed sensor will be made more affordable to farmers as it requires low financial investment, and it can be utilized for decision-making in irrigation. PMID:27537881
Time varying voltage combustion control and diagnostics sensor
Chorpening, Benjamin T [Morgantown, WV; Thornton, Jimmy D [Morgantown, WV; Huckaby, E David [Morgantown, WV; Fincham, William [Fairmont, WV
2011-04-19
A time-varying voltage is applied to an electrode, or a pair of electrodes, of a sensor installed in a fuel nozzle disposed adjacent the combustion zone of a continuous combustion system, such as of the gas turbine engine type. The time-varying voltage induces a time-varying current in the flame which is measured and used to determine flame capacitance using AC electrical circuit analysis. Flame capacitance is used to accurately determine the position of the flame from the sensor and the fuel/air ratio. The fuel and/or air flow rate (s) is/are then adjusted to provide reduced flame instability problems such as flashback, combustion dynamics and lean blowout, as well as reduced emissions. The time-varying voltage may be an alternating voltage and the time-varying current may be an alternating current.
Frequency scanning capaciflector for capacitively determining the material properties
NASA Technical Reports Server (NTRS)
Campbell, Charles E. (Inventor)
1996-01-01
A capaciflector sensor system scanned in frequency is used to detect the permittivity of the material of an object being sensed. A capaciflector sensor element, coupled to current-measuring voltage follower circuitry, is driven by a frequency swept oscillator and generates an output which corresponds to capacity as a function of the input frequency. This swept frequency information is fed into apparatus e.g. a digital computer for comparing the shape of the capacitance vs. frequency curve against characteristic capacitor vs. frequency curves for a variety of different materials which are stored, for example, in a digital memory of the computer or a database. Using a technique of pattern matching, a determination is made as to the identification of the material. Also, when desirable, the distance between the sensor and the object can be determined.
Displacement sensor based on intra-cavity tuning of dual-frequency gas laser
NASA Astrophysics Data System (ADS)
Niu, Haisha; Niu, Yanxiong; Liu, Ning; Li, Jiyang
2018-01-01
A nanometer-resolution displacement measurement instrument based on tunable cavity frequency-splitting method is presented. One beam is split into two orthogonally polarized beams when anisotropic element inserted in the cavity. The two beams with fixed frequency difference are modulated by the movement of the reflection mirror. The changing law of the power tuning curves between the total output and the two orthogonally polarized beams is researched, and a method splitting one tuning cycle to four equal parts is proposed based on the changing law, each part corresponds to one-eighth wavelength of displacement. A laser feedback interferometer (LFI) and piezoelectric ceramic are series connected to the sensor head to calibrate the displacement that less than one-eighth wavelength. The displacement sensor achieves to afford measurement range of 20mm with resolution of 6.93nm.
In Vivo Evaluation of Wearable Head Impact Sensors.
Wu, Lyndia C; Nangia, Vaibhav; Bui, Kevin; Hammoor, Bradley; Kurt, Mehmet; Hernandez, Fidel; Kuo, Calvin; Camarillo, David B
2016-04-01
Inertial sensors are commonly used to measure human head motion. Some sensors have been tested with dummy or cadaver experiments with mixed results, and methods to evaluate sensors in vivo are lacking. Here we present an in vivo method using high speed video to test teeth-mounted (mouthguard), soft tissue-mounted (skin patch), and headgear-mounted (skull cap) sensors during 6-13 g sagittal soccer head impacts. Sensor coupling to the skull was quantified by displacement from an ear-canal reference. Mouthguard displacements were within video measurement error (<1 mm), while the skin patch and skull cap displaced up to 4 and 13 mm from the ear-canal reference, respectively. We used the mouthguard, which had the least displacement from skull, as the reference to assess 6-degree-of-freedom skin patch and skull cap measurements. Linear and rotational acceleration magnitudes were over-predicted by both the skin patch (with 120% NRMS error for a(mag), 290% for α(mag)) and the skull cap (320% NRMS error for a(mag), 500% for α(mag)). Such over-predictions were largely due to out-of-plane motion. To model sensor error, we found that in-plane skin patch linear acceleration in the anterior-posterior direction could be modeled by an underdamped viscoelastic system. In summary, the mouthguard showed tighter skull coupling than the other sensor mounting approaches. Furthermore, the in vivo methods presented are valuable for investigating skull acceleration sensor technologies.
Arefin, Md Shamsul; Redoute, Jean-Michel; Yuce, Mehmet Rasit
2018-01-01
This paper presents a wireless capsule microsystem to detect and monitor the pH, pressure, and temperature of the gastrointestinal tract in real time. This research contributes to the integration of sensors (microfabricated capacitive pH, capacitive pressure, and resistive temperature sensors), frequency modulation and pulse width modulation based interface IC circuits, microcontroller, and transceiver with meandered conformal antenna for the development of a capsule system. The challenges associated with the system miniaturization, higher sensitivity and resolution of sensors, and lower power consumption of interface circuits are addressed. The layout, PCB design, and packaging of a miniaturized wireless capsule, having diameter of 13 mm and length of 28 mm, have successfully been implemented. A data receiver and recorder system is also designed to receive physiological data from the wireless capsule and to send it to a computer for real-time display and recording. Experiments are performed in vitro using a stomach model and minced pork as tissue simulating material. The real-time measurements also validate the suitability of sensors, interface circuits, and meandered antenna for wireless capsule applications.
A comparative study on simulation performances of rigid and bendable SAW for gas sensor
NASA Astrophysics Data System (ADS)
Sidek, Fatini; Arsat, Rashidah; Ibrahim, Rafidah; Idris, Aizzat Ayuni Mohad; Johari, Zaharah; Ling, Leow Pei
2017-03-01
Flexible Surface Acoustic Wave (SAW) devices are very promising technology for various applications that offers excellent flexibility, low in cost and light weight. In this paper, a SAW gas sensor is designed and simulated using COMSOL Multiphysics to investigate the degree of bending effect on the frequency and displacement. The investigations were conducted onto SAW gas sensor as rigid and two different bends direction; bend-in (concave) and bend-out (convex). The operating frequency of the SAW sensor were found to be at the range of 80-200 MHz. The frequency shift of the sensor were obtained after exposing the polyisobutylene (PIB) to the dichloromethane DCM gas which will change the density of sensing layer. From the simulation, it is shown that resonance frequency range of 189MHz for the rigid substrate with displacement of 0.706 nm. Notably, the bending degree of h range from 0.2 µm to 1.25 µm exhibits reduction for displacement and frequency. The higher frequency of bend-out (convex) design achieve is 1.8945 MHz with displacement of 0.68 nm at curve of h= 0.2 µm, Improvement have been observed for the frequency shift of 14 Hz and sensitivity of 1324.24. It shows that the sensor is more sensitive to detect the gas. The evaluation of device bending effect on the eigenfrequency, displacement and frequency shift provide ways to enhance the sensitivity of the gas sensor and expand its possibility of realizing their benefit particularly for sensing device enhancement.
Zoellner, Andreas; Tan, Si; Saraf, Shailendhar; Alfauwaz, Abdul; DeBra, Dan; Buchman, Sasha; Lipa, John A
2017-10-16
We present a method for 3D sub-nanometer displacement measurement using a set of differential optical shadow sensors. It is based on using pairs of collimated beams on opposite sides of an object that are partially blocked by it. Applied to a sphere, our 3-axis sensor module consists of 8 parallel beam-detector sets for redundancy. The sphere blocks half of each beam's power in the nominal centered position, and any displacement can be measured by the differential optical power changes amongst the pairs of detectors. We have experimentally demonstrated a displacement sensitivity of 0.87nm/Hz at 1 Hz and 0.39nm/Hz at 10 Hz. We describe the application of the module to the inertial sensor of a drag-free satellite, which can potentially be used for navigation, geodesy and fundamental science experiments as well as ground based applications.
Displacement sensors using soft magnetostrictive alloys
DOE Office of Scientific and Technical Information (OSTI.GOV)
Hristoforou, E.; Reilly, R.E.
1994-09-01
The authors report results on the response of a family of displacement sensors, which are based on the magnetostrictive delay line (MDL) technique, using current conductor orthogonal to the MDL. Such sensing technique is based on the change of the magnetic circuit and the acoustic stress point of origin due to the displacement of a soft magnetic material above it. Integrated arrays of sensors can be obtained due to the acoustic delay line technique and they can be used as tactile arrays, digitizers or devices for medical application (gait analysis etc.), while absence of hysteresis and low cost of manufacturingmore » make them competent in this sector of sensor market.« less
Investigation of Electrostatic Accelerometer in HUST for Space Science Missions
NASA Astrophysics Data System (ADS)
Bai, Yanzheng; Hu, Ming; Li, Gui; Liu, Li; Qu, Shaobo; Wu, Shuchao; Zhou, Zebing
2014-05-01
High-precision electrostatic accelerometers are significant payload in CHAMP, GRACE and GOCE gravity missions to measure the non-gravitational forces. In our group, space electrostatic accelerometer and inertial sensor based on the capacitive sensors and electrostatic control technique has been investigated for space science research in China such as testing of equivalence principle (TEPO), searching non-Newtonian force in micrometer range, satellite Earth's field recovery and so on. In our group, a capacitive position sensor with a resolution of 10-7pF/Hz1/2 and the μV/Hz1/2 level electrostatic actuator are developed. The fiber torsion pendulum facility is adopt to measure the parameters of the electrostatic controlled inertial sensor such as the resolution, and the electrostatic stiffness, the cross couple between different DOFs. Meanwhile, high voltage suspension and free fall methods are applied to verify the function of electrostatic accelerometer. Last, the engineering model of electrostatic accelerometer has been developed and tested successfully in space and preliminary results are present.
NASA Technical Reports Server (NTRS)
Vranish, John M.
1991-01-01
A capacitive proximity/tactile sensor with unique performance capabilities ('capaciflector' or capacitive reflector) is being developed by NASA/Goddard Space Flight Center (GSFC) for use on robots and payloads in space in the interests of safety, efficiency, and ease of operation. Specifically, this sensor will permit robots and their attached payloads to avoid collisions in space with humans and other objects and to dock these payloads in a cluttered environment. The sensor is simple, robust, and inexpensive to manufacture with obvious and recognized commercial possibilities. Accordingly, NASA/GSFC, in conjunction with industry, is embarking on an effort to 'spin' this technology off into the private sector. This effort includes prototypes aimed at commercial applications. The principles of operation of these prototypes are described along with hardware, software, modelling, and test results. The hardware description includes both the physical sensor in terms of a flexible printed circuit board and the electronic circuitry. The software description will include filtering and detection techniques. The modelling will involve finite element electric field analysis and will underline techniques used for design optimization.
Zhao, Bo; Wang, Lei; Tan, Jiu-Bin
2015-01-01
This paper presents the design and realization of a three degrees of freedom (DOFs) displacement measurement system composed of Hall sensors, which is built for the XYθz displacement measurement of the short stroke stage of the reticle stage of lithography. The measurement system consists of three pairs of permanent magnets mounted on the same plane on the short stroke stage along the Y, Y, X directions, and three single axis Hall sensors correspondingly mounted on the frame of the reticle stage. The emphasis is placed on the decoupling and magnetic field fitting of the three DOFs measurement system. The model of the measurement system is illustrated, and the XY positions and θZ rotation of the short stroke stage can be obtained by decoupling the sensor outputs. A magnetic field fitting by an elliptic function-based compensation method is proposed. The practical field intensity of a permanent magnet at a certain plane height can be substituted for the output voltage of a Hall sensors, which can be expressed by the elliptic function through experimental data as the crucial issue to calculate the three DOFs displacement. Experimental results of the Hall sensor displacement measurement system are presented to validate the proposed three DOFs measurement system. PMID:26370993
A microNewton thrust stand for average thrust measurement of pulsed microthruster.
Zhou, Wei-Jing; Hong, Yan-Ji; Chang, Hao
2013-12-01
A torsional thrust stand has been developed for the study of the average thrust for microNewton pulsed thrusters. The main body of the thrust stand mainly consists of a torsional balance, a pair of flexural pivots, a capacitive displacement sensor, a calibration assembly, and an eddy current damper. The behavior of the stand was thoroughly studied. The principle of thrust measurement was analyzed. The average thrust is determined as a function of the average equilibrium angle displacement of the balance and the spring stiffness. The thrust stand has a load capacity up to 10 kg, and it can theoretically measure the force up to 609.6 μN with a resolution of 24.4 nN. The static calibrations were performed based on the calibration assembly composed of the multiturn coil and the permanent magnet. The calibration results demonstrated good repeatability (less than 0.68% FSO) and good linearity (less than 0.88% FSO). The assembly of the multiturn coil and the permanent magnet was also used as an exciter to simulate the microthruster to further research the performance of the thrust stand. Three sets of force pulses at 17, 33.5, and 55 Hz with the same amplitude and pulse width were tested. The repeatability error at each frequency was 7.04%, 1.78%, and 5.08%, respectively.
Microstrip transmission line for soil moisture measurement
NASA Astrophysics Data System (ADS)
Chen, Xuemin; Li, Jing; Liang, Renyue; Sun, Yijie; Liu, C. Richard; Rogers, Richard; Claros, German
2004-12-01
Pavement life span is often affected by the amount of voids in the base and subgrade soils, especially moisture content in pavement. Most available moisture sensors are based on the capacitive sensing using planar blades. Since the planar sensor blades are fabricated on the same surface to reduce the overall size of the sensor, such structure cannot provide very high accuracy for moisture content measurement. As a consequence, a typical capacitive moisture sensor has an error in the range of 30%. A more accurate measurement is based on the time domain refelctometer (TDR) measurement. However, typical TDR system is fairly expensive equipment, very large in size, and difficult to operate, the moisture content measurement is limited. In this paper, a novel microstrip transmission line based moisture sensor is presented. This sensor uses the phase shift measurement of RF signal going through a transmission line buried in the soil to be measured. Since the amplitude of the transmission measurement is a strong function of the conductivity (loss of the media) and the imaginary part of dielectric constant, and the phase is mainly a strong function of the real part of the dielectric constant, measuring phase shift in transmission mode can directly obtain the soil moisture information. This sensor was designed and implemented. Sensor networking was devised. Both lab and field data show that this sensor is sensitive and accurate.
Chang, Shu-Wei; Kuo, Shih-Yu; Huang, Ting-Hsuan
2017-01-01
This paper presents a novel experimental design for complex structural health monitoring (SHM) studies achieved by integrating 3D printing technologies, high-resolution laser displacement sensors, and multiscale entropy SHM theory. A seven-story structure with a variety of composite bracing systems was constructed using a dual-material 3D printer. A wireless Bluetooth vibration speaker was used to excite the ground floor of the structure, and high-resolution laser displacement sensors (1-μm resolution) were used to monitor the displacement history on different floors. Our results showed that the multiscale entropy SHM method could detect damage on the 3D-printed structures. The results of this study demonstrate that integrating 3D printing technologies and high-resolution laser displacement sensors enables the design of cheap, fast processing, complex, small-scale civil structures for future SHM studies. The novel experimental design proposed in this study provides a suitable platform for investigating the validity and sensitivity of SHM in different composite structures and damage conditions for real life applications in the future. PMID:29271937
Chang, Shu-Wei; Lin, Tzu-Kang; Kuo, Shih-Yu; Huang, Ting-Hsuan
2017-12-22
This paper presents a novel experimental design for complex structural health monitoring (SHM) studies achieved by integrating 3D printing technologies, high-resolution laser displacement sensors, and multiscale entropy SHM theory. A seven-story structure with a variety of composite bracing systems was constructed using a dual-material 3D printer. A wireless Bluetooth vibration speaker was used to excite the ground floor of the structure, and high-resolution laser displacement sensors (1-μm resolution) were used to monitor the displacement history on different floors. Our results showed that the multiscale entropy SHM method could detect damage on the 3D-printed structures. The results of this study demonstrate that integrating 3D printing technologies and high-resolution laser displacement sensors enables the design of cheap, fast processing, complex, small-scale civil structures for future SHM studies. The novel experimental design proposed in this study provides a suitable platform for investigating the validity and sensitivity of SHM in different composite structures and damage conditions for real life applications in the future.
Zhu, Chen; Chen, Yizheng; Zhuang, Yiyang; Huang, Jie
2018-04-24
We present a hollow coaxial cable Fabry-Perot resonator for displacement and strain measurement up to 1000 °C. By employing a novel homemade hollow coaxial cable made of stainless steel as a sensing platform, the high-temperature tolerance of the sensor is dramatically improved. A Fabry-Perot resonator is implemented on this hollow coaxial cable by introducing two highly-reflective reflectors along the cable. Based on a nested structure design, the external displacement and strain can be directly correlated to the cavity length of the resonator. By tracking the shift of the amplitude reflection spectrum of the microwave resonator, the applied displacement and strain can be determined. The displacement measurement experiment showed that the sensor could function properly up to 1000 °C. The sensor was also employed to measure the thermal strain of a steel plate during the heating process. The stability of the novel sensor was also investigated. The developed sensing platform and sensing configurations are robust, cost-effective, easy to manufacture, and can be flexibly designed for many other measurement applications in harsh high-temperature environments.
Monitoring Method of Cutting Force by Using Additional Spindle Sensors
NASA Astrophysics Data System (ADS)
Sarhan, Ahmed Aly Diaa; Matsubara, Atsushi; Sugihara, Motoyuki; Saraie, Hidenori; Ibaraki, Soichi; Kakino, Yoshiaki
This paper describes a monitoring method of cutting forces for end milling process by using displacement sensors. Four eddy-current displacement sensors are installed on the spindle housing of a machining center so that they can detect the radial motion of the rotating spindle. Thermocouples are also attached to the spindle structure in order to examine the thermal effect in the displacement sensing. The change in the spindle stiffness due to the spindle temperature and the speed is investigated as well. Finally, the estimation performance of cutting forces using the spindle displacement sensors is experimentally investigated by machining tests on carbon steel in end milling operations under different cutting conditions. It is found that the monitoring errors are attributable to the thermal displacement of the spindle, the time lag of the sensing system, and the modeling error of the spindle stiffness. It is also shown that the root mean square errors between estimated and measured amplitudes of cutting forces are reduced to be less than 20N with proper selection of the linear stiffness.
Displacement and Strain Measurement up to 1000 °C Using a Hollow Coaxial Cable Fabry-Perot Resonator
Chen, Yizheng; Zhuang, Yiyang
2018-01-01
We present a hollow coaxial cable Fabry-Perot resonator for displacement and strain measurement up to 1000 °C. By employing a novel homemade hollow coaxial cable made of stainless steel as a sensing platform, the high-temperature tolerance of the sensor is dramatically improved. A Fabry-Perot resonator is implemented on this hollow coaxial cable by introducing two highly-reflective reflectors along the cable. Based on a nested structure design, the external displacement and strain can be directly correlated to the cavity length of the resonator. By tracking the shift of the amplitude reflection spectrum of the microwave resonator, the applied displacement and strain can be determined. The displacement measurement experiment showed that the sensor could function properly up to 1000 °C. The sensor was also employed to measure the thermal strain of a steel plate during the heating process. The stability of the novel sensor was also investigated. The developed sensing platform and sensing configurations are robust, cost-effective, easy to manufacture, and can be flexibly designed for many other measurement applications in harsh high-temperature environments. PMID:29695063
Chloride Anions Regulate Kinetics but Not Voltage-Sensor Qmax of the Solute Carrier SLC26a5.
Santos-Sacchi, Joseph; Song, Lei
2016-06-07
In general, SLC26 solute carriers serve to transport a variety of anions across biological membranes. However, prestin (SLC26a5) has evolved, now serving as a motor protein in outer hair cells (OHCs) of the mammalian inner ear and is required for cochlear amplification, a mechanical feedback mechanism to boost auditory performance. The mechanical activity of the OHC imparted by prestin is driven by voltage and controlled by anions, chiefly intracellular chloride. Current opinion is that chloride anions control the Boltzmann characteristics of the voltage sensor responsible for prestin activity, including Qmax, the total sensor charge moved within the membrane, and Vh, a measure of prestin's operating voltage range. Here, we show that standard narrow-band, high-frequency admittance measures of nonlinear capacitance (NLC), an alternate representation of the sensor's charge-voltage (Q-V) relationship, is inadequate for assessment of Qmax, an estimate of the sum of unitary charges contributed by all voltage sensors within the membrane. Prestin's slow transition rates and chloride-binding kinetics adversely influence these estimates, contributing to the prevalent concept that intracellular chloride level controls the quantity of sensor charge moved. By monitoring charge movement across frequency, using measures of multifrequency admittance, expanded displacement current integration, and OHC electromotility, we find that chloride influences prestin kinetics, thereby controlling charge magnitude at any particular frequency of interrogation. Importantly, however, this chloride dependence vanishes as frequency decreases, with Qmax asymptoting at a level irrespective of the chloride level. These data indicate that prestin activity is significantly low-pass in the frequency domain, with important implications for cochlear amplification. We also note that the occurrence of voltage-dependent charge movements in other SLC26 family members may be hidden by inadequate interrogation timescales, and that revelation of such activity could highlight an evolutionary means for kinetic modifications within the family to address hearing requirements in mammals. Copyright © 2016 Biophysical Society. Published by Elsevier Inc. All rights reserved.
NASA Astrophysics Data System (ADS)
Ueno, Toshiyuki; Higuchi, Toshiro
2005-05-01
A high sensitive and heat-resistive magnetic sensor using a magnetostrictive/piezoelectric laminate composite is investigated. The sensing principle is based on the magnetostrictive- and piezoelectric effect, whereby a detected yoke displacement is transduced into a voltage on the piezoelectric materials. The sensor is intended to detect the displacement of a ferromagnetic object in a high temperature environment, where conventional magnetic sensors are not useful. Such applications include sensors in engine of automobile and machinery used in material processing. The sensor features combination of a laminate composite of magnetostrictive/piezoelectric materials with high Curie temperatures and an appropriate magnetic circuit to convert mechanical displacement to sensor voltages and suppress temperature fluctuation. This paper describes the sensing principle and shows experimental results using a composite of Terfenol-D and Lithium Niobate to assure high sensitivity of 50V/mm at bias gap of 0.1mm and a temperature operating range over 200 °C.
Fiber-optical sensor with intensity compensation model in college teaching of physics experiment
NASA Astrophysics Data System (ADS)
Su, Liping; Zhang, Yang; Li, Kun; Zhang, Yu
2017-08-01
Optical fiber sensor technology is one of the main contents of modern information technology, which has a very important position in modern science and technology. Fiber optic sensor experiment can improve students' enthusiasm and broaden their horizons in college physics experiment. In this paper the main structure and working principle of fiberoptical sensor with intensity compensation model are introduced. And thus fiber-optical sensor with intensity compensation model is applied to measure micro displacement of Young's modulus measurement experiment and metal linear expansion coefficient measurement experiment in the college physics experiment. Results indicate that the measurement accuracy of micro displacement is higher than that of the traditional methods using fiber-optical sensor with intensity compensation model. Meanwhile this measurement method makes the students understand on the optical fiber, sensor and nature of micro displacement measurement method and makes each experiment strengthen relationship and compatibility, which provides a new idea for the reform of experimental teaching.
Thermal Transients Excite Neurons through Universal Intramembrane Mechanoelectrical Effects
NASA Astrophysics Data System (ADS)
Plaksin, Michael; Shapira, Einat; Kimmel, Eitan; Shoham, Shy
2018-01-01
Modern advances in neurotechnology rely on effectively harnessing physical tools and insights towards remote neural control, thereby creating major new scientific and therapeutic opportunities. Specifically, rapid temperature pulses were shown to increase membrane capacitance, causing capacitive currents that explain neural excitation, but the underlying biophysics is not well understood. Here, we show that an intramembrane thermal-mechanical effect wherein the phospholipid bilayer undergoes axial narrowing and lateral expansion accurately predicts a potentially universal thermal capacitance increase rate of ˜0.3 % /°C . This capacitance increase and concurrent changes in the surface charge related fields lead to predictable exciting ionic displacement currents. The new MechanoElectrical Thermal Activation theory's predictions provide an excellent agreement with multiple experimental results and indirect estimates of latent biophysical quantities. Our results further highlight the role of electro-mechanics in neural excitation; they may also help illuminate subthreshold and novel physical cellular effects, and could potentially lead to advanced new methods for neural control.
A novel vibration sensor based on phase grating interferometry
NASA Astrophysics Data System (ADS)
Li, Qian; Liu, Xiaojun; Zhao, Li; Lei, Zili; Lu, Zhen; Guo, Lei
2017-05-01
Vibration sensors with high accuracy and reliability are needed urgently for vibration measurement. In this paper a vibration sensor with nanometer resolution is developed. This sensor is based on the principle of phase grating interference for displacement measurement and spatial polarization phase-shift interference technology, and photoelectric counting and A/D signal subdivision are adopted for vibration data output. A vibration measurement system consisting of vibration actuator and displacement adjusting device has been designed to test the vibration sensor. The high resolution and high reliability of the sensor are verified through a series of comparison experiments with Doppler interferometer.
Wu, Fengchi; Wu, Yuqiang; Niu, Zhongwei; Vollmer, Frank
2016-07-29
Mercury is an extremely toxic chemical pollutant of our environment. It has attracted the world's attention due to its high mobility and the ease with which it accumulates in organisms. Sensitive devices and methods specific for detecting mercury ions are, hence, in great need. Here, we have integrated a DNA strand displacement reaction with a whispering gallery mode (WGM) sensor for demonstrating the detection of Hg(2+) ions. Our approach relies on the displacement of a DNA hairpin structure, which forms after the binding of mercury ions to an aptamer DNA sequence. The strand displacement reaction of the DNA aptamer provides highly specific and quantitative means for determining the mercury ion concentration on a label-free WGM sensor platform. Our approach also shows the possibility for manipulating the kinetics of a strand displacement reaction with specific ionic species.
Wu, Fengchi; Wu, Yuqiang; Niu, Zhongwei; Vollmer, Frank
2016-01-01
Mercury is an extremely toxic chemical pollutant of our environment. It has attracted the world’s attention due to its high mobility and the ease with which it accumulates in organisms. Sensitive devices and methods specific for detecting mercury ions are, hence, in great need. Here, we have integrated a DNA strand displacement reaction with a whispering gallery mode (WGM) sensor for demonstrating the detection of Hg2+ ions. Our approach relies on the displacement of a DNA hairpin structure, which forms after the binding of mercury ions to an aptamer DNA sequence. The strand displacement reaction of the DNA aptamer provides highly specific and quantitative means for determining the mercury ion concentration on a label-free WGM sensor platform. Our approach also shows the possibility for manipulating the kinetics of a strand displacement reaction with specific ionic species. PMID:27483277
Kahali Moghaddam, Maryam; Breede, Arne; Brauner, Christian; Lang, Walter
2015-01-01
The production of large and complex parts using fiber composite materials is costly due to the frequent formation of voids, porosity and waste products. By embedding different types of sensors and monitoring the process in real time, the amount of wastage can be significantly reduced. This work focuses on developing a knowledge-based method to improve and ensure complete impregnation of the fibers before initiation of the resin cure. Piezoresistive and capacitive pressure sensors were embedded in fiber composite laminates to measure the real-time the pressure values inside the laminate. A change of pressure indicates resin infusion. The sensors were placed in the laminate and the resin was infused by vacuum. The embedded piezoresistive pressure sensors were able to track the vacuum pressure in the fiber composite laminate setup, as well as the arrival of the resin at the sensor. The pressure increase due to closing the resin inlet was also measured. In contrast, the capacitive type of sensor was found to be inappropriate for measuring these quantities. The following study demonstrates real-time monitoring of pressure changes inside the fiber composite laminate, which validate the use of Darcy’s law in porous media to control the resin flow during infusion. PMID:25825973
Structural health monitoring system of soccer arena based on optical sensors
NASA Astrophysics Data System (ADS)
Shishkin, Victor V.; Churin, Alexey E.; Kharenko, Denis S.; Zheleznova, Maria A.; Shelemba, Ivan S.
2014-05-01
A structural health monitoring system based on optical sensors has been developed and installed on the indoor soccer arena "Zarya" in Novosibirsk. The system integrates 119 fiber optic sensors: 85 strain, 32 temperature and 2 displacement sensors. In addition, total station is used for measuring displacement in 45 control points. All of the constituents of the supporting structure are subjects for monitoring: long-span frames with under floor ties, connections, purlins and foundation.
NASA Astrophysics Data System (ADS)
Nurge, Mark A.
2007-05-01
An electrical capacitance volume tomography system has been created for use with a new image reconstruction algorithm capable of imaging high contrast dielectric distributions. The electrode geometry consists of two 4 × 4 parallel planes of copper conductors connected through custom built switch electronics to a commercially available capacitance to digital converter. Typical electrical capacitance tomography (ECT) systems rely solely on mutual capacitance readings to reconstruct images of dielectric distributions. This paper presents a method of reconstructing images of high contrast dielectric materials using only the self-capacitance measurements. By constraining the unknown dielectric material to one of two values, the inverse problem is no longer ill-determined. Resolution becomes limited only by the accuracy and resolution of the measurement circuitry. Images were reconstructed using this method with both synthetic and real data acquired using an aluminium structure inserted at different positions within the sensing region. Comparisons with standard two-dimensional ECT systems highlight the capabilities and limitations of the electronics and reconstruction algorithm.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Wang, Zujun, E-mail: wangzujun@nint.ac.cn; Huang, Shaoyan; Liu, Minbo
The experiments of displacement damage effects on CMOS APS image sensors induced by neutron irradiation from a nuclear reactor are presented. The CMOS APS image sensors are manufactured in the standard 0.35 μm CMOS technology. The flux of neutron beams was about 1.33 × 10{sup 8} n/cm{sup 2}s. The three samples were exposed by 1 MeV neutron equivalent-fluence of 1 × 10{sup 11}, 5 × 10{sup 11}, and 1 × 10{sup 12} n/cm{sup 2}, respectively. The mean dark signal (K{sub D}), dark signal spike, dark signal non-uniformity (DSNU), noise (V{sub N}), saturation output signal voltage (V{sub S}), and dynamic rangemore » (DR) versus neutron fluence are investigated. The degradation mechanisms of CMOS APS image sensors are analyzed. The mean dark signal increase due to neutron displacement damage appears to be proportional to displacement damage dose. The dark images from CMOS APS image sensors irradiated by neutrons are presented to investigate the generation of dark signal spike.« less
A clamp fixture with interdigital capacitive sensor for in situ evaluation of wire insulation
NASA Astrophysics Data System (ADS)
Sheldon, Robert T.; Bowler, Nicola
2014-02-01
An interdigital capacitive sensor has been designed and optimized for testing aircraft wires by applying a quasinumerical model developed and reported previously. The sensor consists of two patches of interdigitated electrodes, connected by a long signal bus strip, that are intended to conform to two sides of an insulated wire. The electrodes are deposited using photolithography upon a 25.4-μm-thick Kapton® polyimide film. The two electrode patches are attached to the two jaws of a plastic spring-loaded clamp, with each jaw having a milled groove designed such that the electrodes conform to the curved surface of the insulated wire. An SMA connector and cable connect between the electrodes on the clamp and an LCR meter. Segments of pristine M5086/2 aircraft wire, each 10 cm long, were immersed in fluids commonly found in aircraft environments, to cause accelerated chemical degradation. The effects of Jet A fuel, deicing fluid, hydraulic fluid, aircraft cleaner, isopropyl alcohol and distilled water were studied. The frequency-dependent capacitance and dissipation factor of one pristine wire segment and of those degraded in the six fluid environments were measured within the frequency range 100 Hz to 1 MHz. Significant changes in capacitance and dissipation factor were observed for all degraded wires, compared with results for the pristine sample, suggesting the feasibility of detecting insulation degradation in the field. The results were also consistent with those of a similar experiment performed on sheets of Nylon 6, the material that comprises the outermost layer of M5086/2 wire.
A contact-free respiration monitor for smart bed and ambulatory monitoring applications.
Hart, Adam; Tallevi, Kevin; Wickland, David; Kearney, Robert E; Cafazzo, Joseph A
2010-01-01
The development of a contact-free respiration monitor has a broad range of clinical applications in the home and hospital setting. Current approaches suffer from a variety of problems including unreliability, low sensitivity, and high cost. This work describes a novel approach to contact-free respiration monitoring that addresses these shortcomings by employing a highly sensitive capacitance sensor to detect variations in capacitive coupling caused by breathing. A prototype system consisting of a synthetic-metallic pad, sensor electronics, and iPhone interface was built and its performance compared experimentally to the gold standard technique (Respiratory Inductance Plethysmography) on both a healthy volunteer and SimMan robotic mannequin. The prototype sensor effectively captured respiratory movements over breathing rates of 5-55 bpm; achieving an average spectral correlation of 0.88 (CI: 0.86-0.90) and 0.95 (CI: 0.95-0.96) to the gold standard using the SimMan and healthy volunteer respectively.
NASA Astrophysics Data System (ADS)
Faller, Lisa-Marie; Zangl, Hubert
2017-05-01
To guarantee high performance of Micro Optical Electro Mechanical Systems (MOEMS), precise position feedback is crucial. To overcome drawbacks of widely used optical feedback, we propose an inkjet-printed capacitive position sensor as smart packaging solution. Printing processes suffer from tolerances in excess of those from standard processes. Thus, FEM simulations covering assumed tolerances of the system are adopted. These simulations are structured following a Design Of Computer Experiments (DOCE) and are then employed to determine a optimal sensor design. Based on the simulation results, statistical models are adopted for the dynamic system. These models are to be used together with specifically designed hardware, considered to cope with challenging requirements of ≍50nm position accuracy at 10MS/s with 1000μm measurement range. Noise analysis is performed considering the influence of uncertainties to assess resolution and bandwidth capabilities.
Choi, Insub; Kim, JunHee; Kim, Donghyun
2016-12-08
Existing vision-based displacement sensors (VDSs) extract displacement data through changes in the movement of a target that is identified within the image using natural or artificial structure markers. A target-less vision-based displacement sensor (hereafter called "TVDS") is proposed. It can extract displacement data without targets, which then serve as feature points in the image of the structure. The TVDS can extract and track the feature points without the target in the image through image convex hull optimization, which is done to adjust the threshold values and to optimize them so that they can have the same convex hull in every image frame and so that the center of the convex hull is the feature point. In addition, the pixel coordinates of the feature point can be converted to physical coordinates through a scaling factor map calculated based on the distance, angle, and focal length between the camera and target. The accuracy of the proposed scaling factor map was verified through an experiment in which the diameter of a circular marker was estimated. A white-noise excitation test was conducted, and the reliability of the displacement data obtained from the TVDS was analyzed by comparing the displacement data of the structure measured with a laser displacement sensor (LDS). The dynamic characteristics of the structure, such as the mode shape and natural frequency, were extracted using the obtained displacement data, and were compared with the numerical analysis results. TVDS yielded highly reliable displacement data and highly accurate dynamic characteristics, such as the natural frequency and mode shape of the structure. As the proposed TVDS can easily extract the displacement data even without artificial or natural markers, it has the advantage of extracting displacement data from any portion of the structure in the image.
A High Resolution Capacitive Sensing System for the Measurement of Water Content in Crude Oil
Aslam, Muhammad Zubair; Tang, Tong Boon
2014-01-01
This paper presents the design of a non-intrusive system to measure ultra-low water content in crude oil. The system is based on a capacitance to phase angle conversion method. Water content is measured with a capacitance sensor comprising two semi-cylindrical electrodes mounted on the outer side of a glass tube. The presence of water induces a capacitance change that in turn converts into a phase angle, with respect to a main oscillator. A differential sensing technique is adopted not only to ensure high immunity against temperature variation and background noise, but also to eliminate phase jitter and amplitude variation of the main oscillator that could destabilize the output. The complete capacitive sensing system was implemented in hardware and experiment results using crude oil samples demonstrated that a resolution of ±50 ppm of water content in crude oil was achieved by the proposed design. PMID:24967606
Capacitive Sensing of Glucose in Electrolytes Using Graphene Quantum Capacitance Varactors.
Zhang, Yao; Ma, Rui; Zhen, Xue V; Kudva, Yogish C; Bühlmann, Philippe; Koester, Steven J
2017-11-08
A novel graphene-based variable capacitor (varactor) that senses glucose based on the quantum capacitance effect was successfully developed. The sensor utilizes a metal-oxide-graphene varactor device structure that is inherently compatible with passive wireless sensing, a key advantage for in vivo glucose sensing. The graphene varactors were functionalized with pyrene-1-boronic acid (PBA) by self-assembly driven by π-π interactions. Successful surface functionalization was confirmed by both Raman spectroscopy and capacitance-voltage characterization of the devices. Through glucose binding to the PBA, the glucose concentration in the buffer solutions modulates the level of electrostatic doping of the graphene surface to different degrees, which leads to capacitance changes and Dirac voltage shifts. These responses to the glucose concentration were shown to be reproducible and reversible over multiple measurement cycles, suggesting promise for eventual use in wireless glucose monitoring.
A high resolution capacitive sensing system for the measurement of water content in crude oil.
Zubair, Muhammad; Tang, Tong Boon
2014-06-25
This paper presents the design of a non-intrusive system to measure ultra-low water content in crude oil. The system is based on a capacitance to phase angle conversion method. Water content is measured with a capacitance sensor comprising two semi-cylindrical electrodes mounted on the outer side of a glass tube. The presence of water induces a capacitance change that in turn converts into a phase angle, with respect to a main oscillator. A differential sensing technique is adopted not only to ensure high immunity against temperature variation and background noise, but also to eliminate phase jitter and amplitude variation of the main oscillator that could destabilize the output. The complete capacitive sensing system was implemented in hardware and experiment results using crude oil samples demonstrated that a resolution of ± 50 ppm of water content in crude oil was achieved by the proposed design.
Power modulation based fiber-optic loop-sensor having a dual measurement range
NASA Astrophysics Data System (ADS)
Nguyen, Nguyen Q.; Gupta, Nikhil
2009-08-01
A fiber-optic sensor is investigated in this work for potential applications in structural health monitoring. The sensor, called fiber-loop-sensor, is based on bending an optical fiber beyond a critical radius to obtain intensity losses and calibrating the losses with respect to the applied force or displacement. Additionally, in the present case, the use of single-mode optical fibers allows the appearance of several resonance peaks in the transmitted power-displacement graph. The intensity of one of these resonances can be tracked in a narrow range to obtain high sensitivity. Experimental results show that the resolution of 10-4 N for force and 10-5 m for displacement can be obtained in these sensors. The sensors are calibrated for various loop radii and for various loading rates. They are also tested under loading-unloading conditions for over 104 cycles to observe their fatigue behavior. The sensors show very repeatable response and no degradation in performance under these test conditions. Simple construction and instrumentation, high sensitivity, and low cost are the advantages of these sensors.
Self-calibrated humidity sensor in CMOS without post-processing.
Nizhnik, Oleg; Higuchi, Kohei; Maenaka, Kazusuke
2012-01-01
A 1.1 μW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 μm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humidity-sensitive layer of Intervia Photodielectric 8023D-10, a CMOS capacitance to voltage converter, and the self-calibration circuitry.
Chang, Yao-Tang; Yen, Chih-Ta; Wu, Yue-Shiun; Cheng, Hsu-Chih
2013-05-16
This study integrated a fiber loop manufactured by using commercial fiber (SMF-28, Corning) and a fiber Bragg grating (FBG) to form a fiber optic sensor that could simultaneously measure displacement and temperature. The fiber loop was placed in a thermoelectric cooling module with FBG affixed to the module, and, consequently, the center wavelength displacement of FBG was limited by only the effects of temperature change. Displacement and temperature were determined by measuring changes in the transmission of optical power and shifts in Bragg wavelength. This study provides a simple and economical method to measure displacement and temperature simultaneously.
Borehole optical lateral displacement sensor
Lewis, R.E.
1998-10-20
There is provided by this invention an optical displacement sensor that utilizes a reflective target connected to a surface to be monitored to reflect light from a light source such that the reflected light is received by a photoelectric transducer. The electric signal from the photoelectric transducer is then imputed into electronic circuitry to generate an electronic image of the target. The target`s image is monitored to determine the quantity and direction of any lateral displacement in the target`s image which represents lateral displacement in the surface being monitored. 4 figs.
Soil water sensors for irrigation management-What works, what doesn't, and why
USDA-ARS?s Scientific Manuscript database
Irrigation scheduling can be greatly improved if accurate soil water content data are available. There are a plethora of available soil water sensing systems, but those that are practical for irrigation scheduling are divided into two major types: the frequency domain (capacitance) sensors and the t...
Pour, Ghobad Behzadi; Aval, Leila Fekri; Eslami, Shahnaz
2018-04-01
Hydrogen sensors are micro/nano-structure that are used to locate hydrogen leaks. They are considered to have fast response/recovery time and long lifetime as compared to conventional gas sensors. In this paper, fabrication of sensitive capacitive-type hydrogen gas sensor based on Ni thin film has been investigated. The C-V curves of the sensor in different hydrogen concentrations have been reported. Dry oxidation was done in thermal chemical vapor deposition furnace (TCVD). For oxidation time of 5 min, the oxide thickness was 15 nm and for oxidation time 10 min, it was 20 nm. The Ni thin film as a catalytic metal was deposited on the oxide film using electron gun deposition. Two MOS sensors were compared with different oxide film thickness and different hydrogen concentrations. The highest response of the two MOS sensors with 15 nm and 20 nm oxide film thickness in 4% hydrogen concentration was 87.5% and 65.4% respectively. The fast response times for MOS sensors with 15 nm and 20 nm oxide film thickness in 4% hydrogen concentration was 8 s and 21 s, respectively. By increasing the hydrogen concentration from 1% to 4%, the response time for MOS sensor (20nm oxide thickness), was decreased from 28s to 21s. The recovery time was inversely increased from 237s to 360s. The experimental results showed that the MOS sensor based on Ni thin film had a quick response and a high sensitivity.
Wirelessly Interrogated Wear or Temperature Sensors
NASA Technical Reports Server (NTRS)
Woodard, Stanley E.; Taylor, Bryant D.
2010-01-01
Sensors for monitoring surface wear and/or temperature without need for wire connections have been developed. Excitation and interrogation of these sensors are accomplished by means of a magnetic-field-response recorder. In a sensor of the present type as in the previously reported ones, the capacitance and, thus, the resonance frequency, varies as a known function of the quantity of interest that one seeks to determine. Hence, the resonance frequency is measured and used to calculate the quantity of interest.
Evaluation of Pressure Capacitive Sensors for Application in Grasping and Manipulation Analysis.
Pessia, Paola; Cordella, Francesca; Schena, Emiliano; Davalli, Angelo; Sacchetti, Rinaldo; Zollo, Loredana
2017-12-08
The analysis of the human grasping and manipulation capabilities is paramount for investigating human sensory-motor control and developing prosthetic and robotic hands resembling the human ones. A viable solution to perform this analysis is to develop instrumented objects measuring the interaction forces with the hand. In this context, the performance of the sensors embedded in the objects is crucial. This paper focuses on the experimental characterization of a class of capacitive pressure sensors suitable for biomechanical analysis. The analysis was performed in three loading conditions (Distributed load, 9 Tips load, and Wave-shaped load, thanks to three different inter-elements) via a traction/compression testing machine. Sensor assessment was also carried out under human- like grasping condition by placing a silicon material with the same properties of prosthetic cosmetic gloves in between the sensor and the inter-element in order to simulate the human skin. Data show that the input-output relationship of the analyzed, sensor is strongly influenced by both the loading condition (i.e., type of inter-element) and the grasping condition (with or without the silicon material). This needs to be taken into account to avoid significant measurement error. To go over this hurdle, the sensors have to be calibrated under each specific condition in order to apply suitable corrections to the sensor output and significantly improve the measurement accuracy.
Evaluation of Pressure Capacitive Sensors for Application in Grasping and Manipulation Analysis
Pessia, Paola; Cordella, Francesca; Davalli, Angelo; Sacchetti, Rinaldo; Zollo, Loredana
2017-01-01
The analysis of the human grasping and manipulation capabilities is paramount for investigating human sensory-motor control and developing prosthetic and robotic hands resembling the human ones. A viable solution to perform this analysis is to develop instrumented objects measuring the interaction forces with the hand. In this context, the performance of the sensors embedded in the objects is crucial. This paper focuses on the experimental characterization of a class of capacitive pressure sensors suitable for biomechanical analysis. The analysis was performed in three loading conditions (Distributed load, 9 Tips load, and Wave-shaped load, thanks to three different inter-elements) via a traction/compression testing machine. Sensor assessment was also carried out under human- like grasping condition by placing a silicon material with the same properties of prosthetic cosmetic gloves in between the sensor and the inter-element in order to simulate the human skin. Data show that the input–output relationship of the analyzed, sensor is strongly influenced by both the loading condition (i.e., type of inter-element) and the grasping condition (with or without the silicon material). This needs to be taken into account to avoid significant measurement error. To go over this hurdle, the sensors have to be calibrated under each specific condition in order to apply suitable corrections to the sensor output and significantly improve the measurement accuracy. PMID:29292717
A 3D Faraday Shield for Interdigitated Dielectrometry Sensors and Its Effect on Capacitance
Risos, Alex; Long, Nicholas; Hunze, Arvid; Gouws, Gideon
2016-01-01
Interdigitated dielectrometry sensors (IDS) are capacitive sensors investigated to precisely measure the relative permittivity (ϵr) of insulating liquids. Such liquids used in the power industry exhibit a change in ϵr as they degrade. The IDS ability to measure ϵr in-situ can potentially reduce maintenance, increase grid stability and improve safety. Noise from external electric field sources is a prominent issue with IDS. This paper investigates the novelty of applying a Faraday cage onto an IDS as a 3D shield to reduce this noise. This alters the spatially distributed electric field of an IDS affecting its sensing properties. Therefore, dependency of the sensor’s signal with the distance to a shield above the IDS electrodes has been investigated experimentally and theoretically via a Green’s function calculation and FEM. A criteria of the shield’s distance s = s0 has been defined as the distance which gives a capacitance for the IDS equal to 1 − e−2=86.5% of its unshielded value. Theoretical calculations using a simplified geometry gave a constant value for s0/λ = 1.65, where λ is the IDS wavelength. In the experiment, values for s0 were found to be lower than predicted as from theory and the ratio s0/λ variable. This was analyzed in detail and it was found to be resulting from the specific spatial structure of the IDS. A subsequent measurement of a common insulating liquid with a nearby noise source demonstrates a considerable reduction in the standard deviation of the relative permittivity from σunshielded=±9.5% to σshielded=±0.6%. The presented findings enhance our understanding of IDS in respect to the influence of a Faraday shield on the capacitance, parasitic capacitances of the IDS and external noise impact on the measurement of ϵr. PMID:28042868
Linearization of Positional Response Curve of a Fiber-optic Displacement Sensor
NASA Astrophysics Data System (ADS)
Babaev, O. G.; Matyunin, S. A.; Paranin, V. D.
2018-01-01
Currently, the creation of optical measuring instruments and sensors for measuring linear displacement is one of the most relevant problems in the area of instrumentation. Fiber-optic contactless sensors based on the magneto-optical effect are of special interest. They are essentially contactless, non-electrical and have a closed optical channel not subject to contamination. The main problem of this type of sensors is the non-linearity of their positional response curve due to the hyperbolic nature of the magnetic field intensity variation induced by moving the magnetic source mounted on the controlled object relative to the sensing element. This paper discusses an algorithmic method of linearizing the positional response curve of fiber-optic displacement sensors in any selected range of the displacements to be measured. The method is divided into two stages: 1 - definition of the calibration function, 2 - measurement and linearization of the positional response curve (including its temperature stabilization). The algorithm under consideration significantly reduces the number of points of the calibration function, which is essential for the calibration of temperature dependence, due to the use of the points that randomly deviate from the grid points with uniform spacing. Subsequent interpolation of the deviating points and piecewise linear-plane approximation of the calibration function reduces the microcontroller storage capacity for storing the calibration function and the time required to process the measurement results. The paper also presents experimental results of testing real samples of fiber-optic displacement sensors.
Application of chromatic confocal displacement sensor in measurement of tip clearance
NASA Astrophysics Data System (ADS)
Bi, Chao; Li, Di; Fang, Jianguo; Zhang, Bin
2016-10-01
In the field of aeronautics, the tip clearance of rotor exerts a crucial influence on the performance of the aero engine. As defined as the radial distance between the top of the blade and the inner wall of the casing, the tip clearance of too large or small size will adversely affect the normal running of the engine. In order to realize accurate measurement of the tip clearance in a simple way, a non-contact measuring method by the chromatic confocal displacement sensor is proposed in the paper. The sensor possesses the advantages such as small volume, good signal-to-noise ratio, high accuracy and response frequency etc., which make it be widely used in engineering and industry. For testing the performance and potential application of the sensor, a simulation testing platform is established. In the platform, a simulation blisk is installed on the air bearing spindle and a chromatic confocal displacement sensor is fixed on the platform to measure the displacement variation of the blade tip, which can be used to characterize the variation of the tip clearance. In the simulation experiments, both of single and continuous measurement of the tip clearance of the 36 blades on the blisk is executed. As the results of experiments show, the chromatic confocal displacement sensor can meet the requirements of measuring task, in which both of high measuring efficiency and accuracy could be achieved. Therefore, the measuring method proposed in the paper can be utilized in the actual assembling sites of the aero engine.
NASA Astrophysics Data System (ADS)
Wang, Anbo; Miller, Mark S.; Gunther, Michael F.; Murphy, Kent A.; Claus, Richard O.
1993-03-01
A self-referencing technique compensating for fiber losses and source fluctuations in air-gap intensity-based optical fiber sensors is described and demonstrated. A resolution of 0.007 micron has been obtained over a measurement range of 0-250 microns for an intensity-based displacement sensor using this referencing technique. The sensor is shown to have minimal sensitivity to fiber bending losses and variations in the LED input power. A theoretical model for evaluation of step-index multimode optical fiber splice is proposed. The performance of the sensor as a displacement sensor agrees well with the theoretical analysis.
Sun, Jinji; Zhang, Yin
2014-01-24
In this paper, a novel integrated structure is proposed in order to reduce the axial length of the high speed of a magnetically suspended motor (HSMSM) to ensure the maximum speed, which combines radial displacement sensor probes and the permanent magnet biased radial magnetic bearing in HSMSM. The sensor probes are integrated in the magnetic bearing, and the sensor preamplifiers are placed in the control system of the HSMSM, separate from the sensor probes. The proposed integrated structure can save space in HSMSMs, improve the working frequency, reduce the influence of temperature on the sensor circuit, and improve the stability of HSMSMs.
Chen, Yizheng; Zhuang, Yiyang; Du, Yang; Gerald, Rex E.; Tang, Yan
2017-01-01
This paper presents an extrinsic Fabry–Perot interferometer-based optical fiber sensor (EFPI) for measuring three-dimensional (3D) displacements, including interfacial sliding and debonding during delamination. The idea employs three spatially arranged EFPIs as the sensing elements. In our sensor, the three EFPIs are formed by three endfaces of three optical fibers and their corresponding inclined mirrors. Two coincident roof-like metallic structures are used to support the three fibers and the three mirrors, respectively. Our sensor was calibrated and then used to monitor interfacial sliding and debonding between a long square brick of mortar and its support structure (i.e., a steel base plate) during the drying/curing process. This robust and easy-to-manufacture triaxial EFPI-based 3D displacement sensor has great potential in structural health monitoring, the construction industry, oil well monitoring, and geotechnology. PMID:29165351
Zhu, Chen; Chen, Yizheng; Zhuang, Yiyang; Du, Yang; Gerald, Rex E; Tang, Yan; Huang, Jie
2017-11-22
This paper presents an extrinsic Fabry-Perot interferometer-based optical fiber sensor (EFPI) for measuring three-dimensional (3D) displacements, including interfacial sliding and debonding during delamination. The idea employs three spatially arranged EFPIs as the sensing elements. In our sensor, the three EFPIs are formed by three endfaces of three optical fibers and their corresponding inclined mirrors. Two coincident roof-like metallic structures are used to support the three fibers and the three mirrors, respectively. Our sensor was calibrated and then used to monitor interfacial sliding and debonding between a long square brick of mortar and its support structure (i.e., a steel base plate) during the drying/curing process. This robust and easy-to-manufacture triaxial EFPI-based 3D displacement sensor has great potential in structural health monitoring, the construction industry, oil well monitoring, and geotechnology.
A Lorentz force actuated magnetic field sensor with capacitive read-out
NASA Astrophysics Data System (ADS)
Stifter, M.; Steiner, H.; Kainz, A.; Keplinger, F.; Hortschitz, W.; Sauter, T.
2013-05-01
We present a novel design of a resonant magnetic field sensor with capacitive read-out permitting wafer level production. The device consists of a single-crystal silicon cantilever manufactured from the device layer of an SOI wafer. Cantilevers represent a very simple structure with respect to manufacturing and function. On the top of the structure, a gold lead carries AC currents that generate alternating Lorentz forces in an external magnetic field. The free end oscillation of the actuated cantilever depends on the eigenfrequencies of the structure. Particularly, the specific design of a U-shaped structure provides a larger force-to-stiffness-ratio than standard cantilevers. The electrodes for detecting cantilever deflections are separately fabricated on a Pyrex glass-wafer. They form the counterpart to the lead on the freely vibrating planar structure. Both wafers are mounted on top of each other. A custom SU-8 bonding process on wafer level creates a gap which defines the equilibrium distance between sensing electrodes and the vibrating structure. Additionally to the capacitive read-out, the cantilever oscillation was simultaneously measured with laser Doppler vibrometry through proper windows in the SOI handle wafer. Advantages and disadvantages of the asynchronous capacitive measurement configuration are discussed quantitatively and presented by a comprehensive experimental characterization of the device under test.
Ultra-Sensitive Magnetoresistive Displacement Sensing Device
NASA Technical Reports Server (NTRS)
Olivas, John D. (Inventor); Lairson, Bruce M. (Inventor); Ramesham, Rajeshuni (Inventor)
2003-01-01
An ultrasensitive displacement sensing device for use in accelerometers, pressure gauges, temperature transducers, and the like, comprises a sputter deposited, multilayer, magnetoresistive field sensor with a variable electrical resistance based on an imposed magnetic field. The device detects displacement by sensing changes in the local magnetic field about the magnetoresistive field sensor caused by the displacement of a hard magnetic film on a movable microstructure. The microstructure, which may be a cantilever, membrane, bridge, or other microelement, moves under the influence of an acceleration a known displacement predicted by the configuration and materials selected, and the resulting change in the electrical resistance of the MR sensor can be used to calculate the displacement. Using a micromachining approach, very thin silicon and silicon nitride membranes are fabricated in one preferred embodiment by means of anisotropic etching of silicon wafers. Other approaches include reactive ion etching of silicon on insulator (SOI), or Low Pressure Chemical Vapor Deposition of silicon nitride films over silicon substrates. The device is found to be improved with the use of giant magnetoresistive elements to detect changes in the local magnetic field.
Fiber-Optic Linear Displacement Sensor Based On Matched Interference Filters
NASA Astrophysics Data System (ADS)
Fuhr, Peter L.; Feener, Heidi C.; Spillman, William B.
1990-02-01
A fiber optic linear displacement sensor has been developed in which a pair of matched interference filters are used to encode linear position on a broadband optical signal as relative intensity variations. As the filters are displaced, the optical beam illuminates varying amounts of each filter. Determination of the relative intensities at each filter pairs' passband is based on measurements acquired with matching filters and photodetectors. Source power variation induced errors are minimized by basing determination of linear position on signal Visibility. A theoretical prediction of the sensor's performance is developed and compared with experiments performed in the near IR spectral region using large core multimode optical fiber.
Strle, Drago; Štefane, Bogdan; Zupanič, Erik; Trifkovič, Mario; Maček, Marijan; Jakša, Gregor; Kvasič, Ivan; Muševič, Igor
2014-01-01
The article offers a comparison of the sensitivities for vapour trace detection of Trinitrotoluene (TNT) explosives of two different sensor systems: a chemo-mechanical sensor based on chemically modified Atomic Force Microscope (AFM) cantilevers based on Micro Electro Mechanical System (MEMS) technology with optical detection (CMO), and a miniature system based on capacitive detection of chemically functionalized planar capacitors with interdigitated electrodes with a comb-like structure with electronic detection (CE). In both cases (either CMO or CE), the sensor surfaces are chemically functionalized with a layer of APhS (trimethoxyphenylsilane) molecules, which give the strongest sensor response for TNT. The construction and calibration of a vapour generator is also presented. The measurements of the sensor response to TNT are performed under equal conditions for both systems, and the results show that CE system with ultrasensitive electronics is far superior to optical detection using MEMS. Using CMO system, we can detect 300 molecules of TNT in 10+12 molecules of N2 carrier gas, whereas the CE system can detect three molecules of TNT in 10+12 molecules of carrier N2. PMID:24977388
Integration of a Capacitive EIS Sensor into a FIA System for pH and Penicillin Determination
Rolka, David; Poghossian, Arshak; Schöning, Michael J.
2004-01-01
A field-effect based capacitive EIS (electrolyte-insulator-semiconductor) sensor with a p-Si-SiO2-Ta2O5 structure has been successfully integrated into a commercial FIA (flow-injection analysis) system and system performances have been proven and optimised for pH and penicillin detection. A flow-through cell was designed taking into account the requirement of a variable internal volume (from 12 μl up to 48 μl) as well as an easy replacement of the EIS sensor. FIA parameters (sample volume, flow rate, distance between the injection valve and the EIS sensor) have been optimised in terms of high sensitivity and reproducibility as well as a minimum dispersion of the injected sample zone. An acceptable compromise between different FIA parameters has been found. For the cell design used in this study, best results have been achieved with a flow rate of 1.4 ml/min, distance between the injection valve and the EIS sensor of 6.5 cm, probe volume of 0.75 ml, cell internal volume of 12 μl. A sample throughput of at least 15 samples/h was typically obtained.
NASA Technical Reports Server (NTRS)
Dhawan, R.; Gunther, M. F.; Claus, R. O.
1991-01-01
Quantitative measurements of the in-plane particle displacement components of ultrasonic surface acoustic wave fields using extrinsic Fizeau fiber interferometric (EFFI) sensors are reported. Wave propagation in materials and the fiber sensor elements are briefly discussed. Calibrated experimental results obtained for simulated acoustic emission events on homogeneous metal test specimens are reported and compared to previous results obtained using piezoelectric transducers.
NASA Astrophysics Data System (ADS)
Zhou, Wenhe; He, Xuan; Wu, Jianyun; Wang, Liangbi; Wang, Liangcheng
2017-07-01
The parallel plate capacitive humidity sensor based on the grid upper electrode is considered to be a promising one in some fields which require a humidity sensor with better dynamic characteristics. To strengthen the structure and balance the electric charge of the grid upper electrode, a strip is needed. However, it is the strip that keeps the dynamic characteristics of the sensor from being further improved. The numerical method is time- and cost-saving, but the numerical study on the response time of the sensor is just of bits and pieces. The numerical models presented by these studies did not consider the porosity effect of the polymer film on the dynamic characteristics. To overcome the defect of the grid upper electrode, a new structure of the upper electrode is provided by this paper first, and then a model considering the porosity effects of the polymer film on the dynamic characteristics is presented and validated. Finally, with the help of software FLUENT, parameter effects on the response time of the humidity sensor based on the microhole upper electrode are studied by the numerical method. The numerical results show that the response time of the microhole upper electrode sensor is 86% better than that of the grid upper electrode sensor, the response time of humidity sensor can be improved by reducing the hole spacing, increasing the aperture, reducing film thickness, and reasonably enlarging the porosity of the film.
NASA Astrophysics Data System (ADS)
Shimamoto, Atsushi; Tanaka, Kohichi
1995-09-01
An optical fiber bundle displacement sensor with subnanometer order resolution and low thermal drift is proposed. The setup is based on a carrier amplifier system and involves techniques to eliminate fluctuation in the light power of the source. The achieved noise level of the sensor was 0.03 nm/ \\radical Hz \\end-radical . The stability was estimated by comparing the outputs of two different sensors from the same target for 4 ks (67 min). The relative displacements between the fiber bundle ends of the two sensors and the target surface varied in the area of 400 nm depending on the ambient temperature variation at 2 deg C. However, the difference in output between the two sensor systems is within 2 nm for more than 1 hour of measurement. It is expected that it would be reduced to within the area of 0.1 nm if the ambient temperature were controlled to within +/-0.1 deg C. It is concluded that the stability of the sensors is sufficiently good to be used with nanotechnological instruments.
Adaptive electric potential sensors for smart signal acquisition and processing
NASA Astrophysics Data System (ADS)
Prance, R. J.; Beardsmore-Rust, S.; Prance, H.; Harland, C. J.; Stiffell, P. B.
2007-07-01
Current applications of the Electric Potential Sensor operate in a strongly (capacitively) coupled limit, with the sensor physically close to or touching the source. This mode of operation screens the sensor effectively from the majority of external noise. To date however the full capability of these sensors operating in a remote mode has not been realised outside of a screened environment (Faraday cage). This paper describes the results of preliminary work in tailoring the response of the sensors to particular signals and so reject background noise, thereby enhancing both the dynamic range and signal to noise ratio significantly.
A simple sensing mechanism for wireless, passive pressure sensors.
Drazan, John F; Wassick, Michael T; Dahle, Reena; Beardslee, Luke A; Cady, Nathaniel C; Ledet, Eric H
2016-08-01
We have developed a simple wireless pressure sensor that consists of only three electrically isolated components. Two conductive spirals are separated by a closed cell foam that deforms when exposed to changing pressures. This deformation changes the capacitance and thus the resonant frequency of the sensors. Prototype sensors were submerged and wirelessly interrogated while being exposed to physiologically relevant pressures from 10 to 130 mmHg. Sensors consistently exhibited a sensitivity of 4.35 kHz/mmHg which is sufficient for resolving physiologically relevant pressure changes in vivo. These simple sensors have the potential for in vivo pressure sensing.
In-line rotating capacitive torque sensor
Kronberg, James W.
1991-01-01
A method and apparatus for measuring torques developed along a rotating mechanical assembly comprising a rotating inner portion and a stationary outer portion. The rotating portion has an electrically-conductive flexing section fitted between two coaxial shafts in a configuration which varies radially in accordance with applied torque. The stationary portion comprises a plurality of conductive plates forming a surface concentric with and having a diameter slightly larger than the diameter of the rotating portion. The capacitance between the outer, nonrotating and inner, rotating portion varies with changes in the radial configuration of the rotating portion. Signal output varies approximately linearly with torque for small torques, nonlinearly for larger torques. The sensor is preferably surrounded by a conductive shell to minimize electrical interference from external sources.
Mutual capacitance of liquid conductors in deformable tactile sensing arrays
NASA Astrophysics Data System (ADS)
Li, Bin; Fontecchio, Adam K.; Visell, Yon
2016-01-01
Advances in highly deformable electronics are needed in order to enable emerging categories of soft computing devices ranging from wearable electronics, to medical devices, and soft robotic components. The combination of highly elastic substrates with intrinsically stretchable conductors holds the promise of enabling electronic sensors that can conform to curved objects, reconfigurable displays, or soft biological tissues, including the skin. Here, we contribute sensing principles for tactile (mechanical image) sensors based on very low modulus polymer substrates with embedded liquid metal microfluidic arrays. The sensors are fabricated using a single-step casting method that utilizes fine nylon filaments to produce arrays of cylindrical channels on two layers. The liquid metal (gallium indium alloy) conductors that fill these channels readily adopt the shape of the embedding membrane, yielding levels of deformability greater than 400%, due to the use of soft polymer substrates. We modeled the sensor performance using electrostatic theory and continuum mechanics, yielding excellent agreement with experiments. Using a matrix-addressed capacitance measurement technique, we are able to resolve strain distributions with millimeter resolution over areas of several square centimeters.
A humidity sensing organic-inorganic composite for environmental monitoring.
Ahmad, Zubair; Zafar, Qayyum; Sulaiman, Khaulah; Akram, Rizwan; Karimov, Khasan S
2013-03-14
In this paper, we present the effect of varying humidity levels on the electrical parameters and the multi frequency response of the electrical parameters of an organic-inorganic composite (PEPC+NiPc+Cu2O)-based humidity sensor. Silver thin films (thickness ~200 nm) were primarily deposited on plasma cleaned glass substrates by the physical vapor deposition (PVD) technique. A pair of rectangular silver electrodes was formed by patterning silver film through standard optical lithography technique. An active layer of organic-inorganic composite for humidity sensing was later spun coated to cover the separation between the silver electrodes. The electrical characterization of the sensor was performed as a function of relative humidity levels and frequency of the AC input signal. The sensor showed reversible changes in its capacitance with variations in humidity level. The maximum sensitivity ~31.6 pF/%RH at 100 Hz in capacitive mode of operation has been attained. The aim of this study was to increase the sensitivity of the previously reported humidity sensors using PEPC and NiPc, which has been successfully achieved.
A Humidity Sensing Organic-Inorganic Composite for Environmental Monitoring
Ahmad, Zubair; Zafar, Qayyum; Sulaiman, Khaulah; Akram, Rizwan; Karimov, Khasan S.
2013-01-01
In this paper, we present the effect of varying humidity levels on the electrical parameters and the multi frequency response of the electrical parameters of an organic-inorganic composite (PEPC+NiPc+Cu2O)-based humidity sensor. Silver thin films (thickness ∼200 nm) were primarily deposited on plasma cleaned glass substrates by the physical vapor deposition (PVD) technique. A pair of rectangular silver electrodes was formed by patterning silver film through standard optical lithography technique. An active layer of organic-inorganic composite for humidity sensing was later spun coated to cover the separation between the silver electrodes. The electrical characterization of the sensor was performed as a function of relative humidity levels and frequency of the AC input signal. The sensor showed reversible changes in its capacitance with variations in humidity level. The maximum sensitivity ∼31.6 pF/%RH at 100 Hz in capacitive mode of operation has been attained. The aim of this study was to increase the sensitivity of the previously reported humidity sensors using PEPC and NiPc, which has been successfully achieved. PMID:23493124
Mutual capacitance of liquid conductors in deformable tactile sensing arrays
DOE Office of Scientific and Technical Information (OSTI.GOV)
Li, Bin; Fontecchio, Adam K.; Visell, Yon
2016-01-04
Advances in highly deformable electronics are needed in order to enable emerging categories of soft computing devices ranging from wearable electronics, to medical devices, and soft robotic components. The combination of highly elastic substrates with intrinsically stretchable conductors holds the promise of enabling electronic sensors that can conform to curved objects, reconfigurable displays, or soft biological tissues, including the skin. Here, we contribute sensing principles for tactile (mechanical image) sensors based on very low modulus polymer substrates with embedded liquid metal microfluidic arrays. The sensors are fabricated using a single-step casting method that utilizes fine nylon filaments to produce arraysmore » of cylindrical channels on two layers. The liquid metal (gallium indium alloy) conductors that fill these channels readily adopt the shape of the embedding membrane, yielding levels of deformability greater than 400%, due to the use of soft polymer substrates. We modeled the sensor performance using electrostatic theory and continuum mechanics, yielding excellent agreement with experiments. Using a matrix-addressed capacitance measurement technique, we are able to resolve strain distributions with millimeter resolution over areas of several square centimeters.« less
Wheel-Based Ice Sensors for Road Vehicles
NASA Technical Reports Server (NTRS)
Arndt, G. Dickey; Fink, Patrick W.; Ngo, Phong H.; Carl, James R.
2011-01-01
Wheel-based sensors for detection of ice on roads and approximate measurement of the thickness of the ice are under development. These sensors could be used to alert drivers to hazardous local icing conditions in real time. In addition, local ice-thickness measurements by these sensors could serve as guidance for the minimum amount of sand and salt required to be dispensed locally onto road surfaces to ensure safety, thereby helping road crews to utilize their total supplies of sand and salt more efficiently. Like some aircraft wing-surface ice sensors described in a number of previous NASA Tech Briefs articles, the wheelbased ice sensors are based, variously, on measurements of changes in capacitance and/or in radio-frequency impedance as affected by ice on surfaces. In the case of ice on road surfaces, the measurable changes in capacitance and/or impedance are attributable to differences among the electric permittivities of air, ice, water, concrete, and soil. In addition, a related phenomenon that can be useful for distinguishing between ice and water is a specific transition in the permittivity of ice at a temperature- dependent frequency. This feature also provides a continuous calibration of the sensor to allow for changing road conditions. Several configurations of wheel-based ice sensors are under consideration. For example, in a simple two-electrode capacitor configuration, one of the electrodes would be a circumferential electrode within a tire, and the ground would be used as the second electrode. Optionally, the steel belts that are already standard parts of many tires could be used as the circumferential electrodes. In another example (see figure), multiple electrodes would be embedded in rubber between the steel belt and the outer tire surface. These electrodes would be excited in alternating polarities at one or more suitable audio or radio frequencies to provide nearly continuous monitoring of the road surface under the tire. In still another example, one or more microwave stripline(s) or coplanar waveguide(s) would be embedded in a tire near its outer surface; in comparison with lower-frequency capacitive devices, a device of this type could be more sensitive.
Khan, Md Rajibur Rahaman; Kang, Shin-Won
2016-07-09
In this paper, we propose a temperature/thermal sensor that contains a Rhodamine-B sensing membrane. We applied two different sensing methods, namely, fiber-optic pulse width modulation (PWM) and an interdigitated capacitor (IDC)-based temperature sensor to measure the temperature from 5 °C to 100 °C. To the best of our knowledge, the fiber-optic PWM-based temperature sensor is reported for the first time in this study. The proposed fiber-optic PWM temperature sensor has good sensing ability; its sensitivity is ~3.733 mV/°C. The designed temperature-sensing system offers stable sensing responses over a wide dynamic range, good reproducibility properties with a relative standard deviation (RSD) of ~0.021, and the capacity for a linear sensing response with a correlation coefficient of R² ≈ 0.992 over a wide sensing range. In our study, we also developed an IDC temperature sensor that is based on the capacitance variation principle as the IDC sensing element is heated. We compared the performance of the proposed temperature-sensing systems with different fiber-optic temperature sensors (which are based on the fiber-optic wavelength shift method, the long grating fiber-optic Sagnac loop, and probe type fiber-optics) in terms of sensitivity, dynamic range, and linearity. We observed that the proposed sensing systems have better sensing performance than the above-mentioned sensing system.
Mapping Electrical Crosstalk in Pixelated Sensor Arrays
NASA Technical Reports Server (NTRS)
Seshadri, Suresh (Inventor); Cole, David (Inventor); Smith, Roger M. (Inventor); Hancock, Bruce R. (Inventor)
2017-01-01
The effects of inter pixel capacitance in a pixilated array may be measured by first resetting all pixels in the array to a first voltage, where a first image is read out, followed by resetting only a subset of pixels in the array to a second voltage, where a second image is read out, where the difference in the first and second images provide information about the inter pixel capacitance. Other embodiments are described and claimed.
Silicon base plate with low parasitic electrical interference for sensors
NASA Technical Reports Server (NTRS)
Tang, Tony K. (Inventor); Gutierrez, Roman C. (Inventor)
2002-01-01
A microgyroscope has a baseplate made of the same material as the rest of the microgyroscope. The baseplate is a silicon baseplate having a heavily p-doped epilayer covered by a thick dielectric film and metal electrodes. The metal electrodes are isolated from the ground plane by the dielectric. This provides very low parasitic capacitive coupling between the electrodes. The thick dielectric reduces the capacitance between the electrodes and the ground plane.
Mapping Electrical Crosstalk in Pixelated Sensor Arrays
NASA Technical Reports Server (NTRS)
Smith, Roger M (Inventor); Hancock, Bruce R. (Inventor); Cole, David (Inventor); Seshadri, Suresh (Inventor)
2013-01-01
The effects of inter pixel capacitance in a pixilated array may be measured by first resetting all pixels in the array to a first voltage, where a first image is read out, followed by resetting only a subset of pixels in the array to a second voltage, where a second image is read out, where the difference in the first and second images provide information about the inter pixel capacitance. Other embodiments are described and claimed.
Parametric Phase-Sensitive Detector Using Two-cell SQUID
2010-08-01
an attenuator of -20 dB. The microwave was fed into the coplanar resonator by a coplanar capacitance of 9 fF, and corresponding response was coupled...transmission line between the two coupled coplanar capacitances . With a network analyzer, the resonant frequency was confirmed to be 8.985 GHz and the...microwave directional sensors based on two-cell SQUIDs. Two SQUID circuits with different values of McCumber parameter βc have been tested. Observed
A Microseismometer for Terrestrial and Extraterrestrial Applications
NASA Technical Reports Server (NTRS)
Banerdt, W.; Kaiser, W.; Vanzandt, T.
1993-01-01
The scientific and technical requirements of extraterrestrial seismology place severe demands on instrumentation. Performance in terms of sensitivity, stability, and frequency band must match that of the best terrestrial instruments, at a fraction of the size, mass, and power. In addition, this performance must be realized without operator intervention in harsh temperature, shock, and radiation environments. These constraints have forced us to examine some fundamental limits of accelerometer design in order to produce a small, rugged, sensitive seismometer. Silicon micromachined sensor technology offers techniques for the fabrication of monolithic, robust, compact, low-power and -mass accelerometers. However, currently available sensors offer inadequate sensitivity and bandwidth. Our implementation of an advanced silicon micro machined seismometer is based on principles developed at JPL for high-sensitivity position sensor technology. The use of silicon micro machining technology with these new principles should enable the fabrication of a 10(exp -11) g sensitivity seismometer with a bandwidth of at least 0.01 to 20 Hz. The low Q properties of pure single-crystal silicon are essential in order to minimize the Brownian thermal noise limitations generally characteristic of seismometers with small proof masses. A seismometer consists of a spring-supported proof mass and a transducer for measuring its motion. For long period motion a position sensor is generally used, for which the displacement is proportional to the ground acceleration. The mechanical sensitivity can be increased either by increasing the proof mass or decreasing the spring stiffness, neither of which is desirable for planetary applications. Our approach has been to use an ultra sensitive capacitive position sensor with a sensitivity of better than 10(exp -13) m/Hz(exp 1/2). This allows the use of a stiffer suspension and a smaller proof mass. We have built several prototypes using these principles, and tests show that these devices can exhibit performance comparable to state-of-the-art instruments.
Sun, Jinji; Zhang, Yin
2014-01-01
In this paper, a novel integrated structure is proposed in order to reduce the axial length of the high speed of a magnetically suspended motor (HSMSM) to ensure the maximum speed, which combines radial displacement sensor probes and the permanent magnet biased radial magnetic bearing in HSMSM. The sensor probes are integrated in the magnetic bearing, and the sensor preamplifiers are placed in the control system of the HSMSM, separate from the sensor probes. The proposed integrated structure can save space in HSMSMs, improve the working frequency, reduce the influence of temperature on the sensor circuit, and improve the stability of HSMSMs. PMID:24469351
Capacitive acoustic wave detector and method of using same
NASA Technical Reports Server (NTRS)
Yost, William T. (Inventor)
1994-01-01
A capacitor having two substantially parallel conductive faces is acoustically coupled to a conductive sample end such that the sample face is one end of the capacitor. A non-contacting dielectric may serve as a spacer between the two conductive plates. The formed capacitor is connected to an LC oscillator circuit such as a Hartley oscillator circuit producing an output frequency which is a function of the capacitor spacing. This capacitance oscillates as the sample end coating is oscillated by an acoustic wave generated in the sample by a transmitting transducer. The electrical output can serve as an absolute indicator of acoustic wave displacement.