Microfabricated Patch Clamp Electrodes for Improved Ion Channel Protein Measurements
NASA Astrophysics Data System (ADS)
Klemic, James; Klemic, Kathryn; Reed, Mark; Sigworth, Frederick
2002-03-01
Ion channels are trans-membrane proteins that underlie many cell functions including hormone and neurotransmitter release, muscle contraction and cell signaling cascades. Ion channel proteins are commonly characterized via the patch clamp method in which an extruded glass tube containing ionic solution, manipulated by an expert technician, is brought into contact with a living cell to record ionic current through the cell membrane. Microfabricated planar patch electrodes, micromolded in the silicone elastomer poly-dimethylsiloxane (PDMS) from microlithographically patterned structures, have been developed that improve on this method. Microfabrication techniques allow arrays of patch electrodes to be fabricated, increasing the throughput of the measurement technique. Planar patch electrodes readily allow the automation of cell sealing, further increasing throughput. Microfabricated electrode arrays may be readily integrated with microfluidic structures to allow fast, in situ solution exchange. Miniaturization of the electrode geometry should increase both the signal to noise and the bandwidth of the measurement. Microfabricated patch electrode arrays have been fabricated and measurements have been taken.
Microscale patterning of thermoplastic polymer surfaces by selective solvent swelling.
Rahmanian, Omid; Chen, Chien-Fu; DeVoe, Don L
2012-09-04
A new method for the fabrication of microscale features in thermoplastic substrates is presented. Unlike traditional thermoplastic microfabrication techniques, in which bulk polymer is displaced from the substrate by machining or embossing, a unique process termed orogenic microfabrication has been developed in which selected regions of a thermoplastic surface are raised from the substrate by an irreversible solvent swelling mechanism. The orogenic technique allows thermoplastic surfaces to be patterned using a variety of masking methods, resulting in three-dimensional features that would be difficult to achieve through traditional microfabrication methods. Using cyclic olefin copolymer as a model thermoplastic material, several variations of this process are described to realize growth heights ranging from several nanometers to tens of micrometers, with patterning techniques include direct photoresist masking, patterned UV/ozone surface passivation, elastomeric stamping, and noncontact spotting. Orogenic microfabrication is also demonstrated by direct inkjet printing as a facile photolithography-free masking method for rapid desktop thermoplastic microfabrication.
Microfabrication of Cell-Laden Hydrogels for Engineering Mineralized and Load Bearing Tissues.
Li, Chia-Cheng; Kharaziha, Mahshid; Min, Christine; Maas, Richard; Nikkhah, Mehdi
2015-01-01
Microengineering technologies and advanced biomaterials have extensive applications in the field of regenerative medicine. In this chapter, we review the integration of microfabrication techniques and hydrogel-based biomaterials in the field of dental, bone, and cartilage tissue engineering. We primarily discuss the major features that make hydrogels attractive candidates to mimic extracellular matrix (ECM), and we consider the benefits of three-dimensional (3D) culture systems for tissue engineering applications. We then focus on the fundamental principles of microfabrication techniques including photolithography, soft lithography and bioprinting approaches. Lastly, we summarize recent research on microengineering cell-laden hydrogel constructs for dental, bone and cartilage regeneration, and discuss future applications of microfabrication techniques for load-bearing tissue engineering.
Microfabricated biocapsules for the immunoisolation of pancreatic islets of Langerhans
NASA Astrophysics Data System (ADS)
Desai, Tejal Ashwin
1998-08-01
A silicon-based microfabricated biocapsule was developed and evaluated for use in the immunoisolation of transplanted cells, specifically pancreatic islets of Langerhans for the treatment of Type I diabetes. The transplantation of cells with specific functions is a promising therapy for a wide variety of pathologies including diabetes, Parkinson's, and hemophilia. Such transplanted cells, however, are sensitive to both cellular and humoral immune rejection as well as damage by autoimmune activity, without chronic immunosuppression. The research presented in this dissertation investigated whether microfabricated silicon-based biocapsules, with uniform membrane pore sizes in the tens of nanometer range, could provide an immunoprotective environment for pancreatic islets and other insulin-secreting cell lines, while maintaining cell viability and functionality. By utilizing fabrication techniques commonly employed in the microelectronics industry (MEMS), membranes were fabricated with precisely controlled and uniform pore sizes, allowing the optimization of biocapsule membrane parameters for the encapsulation of specific hormone-secreting cell types. The biocapsule-forming process employed bulk micromachining to define cell-containing chambers within single crystalline silicon wafers. These chambers interface with the surrounding biological environment through polycrystalline silicon filter membranes, which were surface micromachined to present a high density of uniform pores to allow sufficient permeability to oxygen, glucose, and insulin. Both in vitro and in vivo experiments established the biocompatibility of the microfabricated biocapsule, and demonstrated that encapsulated cells could live and function normally in terms of insulin-secretion within microfabricated environments for extended periods of time. This novel research shows the potential of using microfabricated biocapsules for the encapsulation of several different cell xenografts. The semipermeability of microfabricated biocapsules, their biocompatibility, along with their thermal and chemical stability, may provide an improved encapsulation device for the immunoisolation of cell xenografts in hormone-replacement and cell-based therapies.
Microscale Patterning of Thermoplastic Polymer Surfaces by Selective Solvent Swelling
Rahmanian, Omid; Chen, Chien-Fu; DeVoe, Don L.
2012-01-01
A new method for the fabrication of microscale features in thermoplastic substrates is presented. Unlike traditional thermoplastic microfabrication techniques, in which bulk polymer is displaced from the substrate by machining or embossing, a unique process termed orogenic microfabrication has been developed in which selected regions of a thermoplastic surface are raised from the substrate by an irreversible solvent swelling mechanism. The orogenic technique allows thermoplastic surfaces to be patterned using a variety of masking methods, resulting in three-dimensional features that would be difficult to achieve through traditional microfabrication methods. Using cyclic olefin copolymer as a model thermoplastic material, several variations of this process are described to realize growth heights ranging from several nanometers to tens of microns, with patterning techniques include direct photoresist masking, patterned UV/ozone surface passivation, elastomeric stamping, and noncontact spotting. Orogenic microfabrication is also demonstrated by direct inkjet printing as a facile photolithography-free masking method for rapid desktop thermoplastic microfabrication. PMID:22900539
Microfabrication techniques for integrated sensors and microsystems.
Wise, K D; Najafi, K
1991-11-29
Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications ranging from biomedicine to automated manufacturing. As they continue to expand, entire microsystems merging electrical, mechanical, thermal, optical, magnetic, and perhaps chemical components should be possible on a common substrate.
Processing of Nanostructured Devices Using Microfabrication Techniques
NASA Technical Reports Server (NTRS)
Xu, Jennifer C (Inventor); Kulis, Michael H (Inventor); Berger, Gordon M (Inventor); Hunter, Gary W (Inventor); Vander Wal, Randall L (Inventor); Evans, Laura J (Inventor)
2014-01-01
Systems and methods that incorporate nanostructures into microdevices are discussed herein. These systems and methods can allow for standard microfabrication techniques to be extended to the field of nanotechnology. Sensors incorporating nanostructures can be fabricated as described herein, and can be used to reliably detect a range of gases with high response.
NASA Astrophysics Data System (ADS)
Piqué, Alberto; Auyeung, Raymond C. Y.; Kim, Heungsoo; Charipar, Nicholas A.; Mathews, Scott A.
2016-06-01
Laser-based materials processing techniques are gaining widespread use in micro-manufacturing applications. The use of laser microfabrication techniques enables the processing of micro- and nanostructures from a wide range of materials and geometries without the need for masking and etching steps commonly associated with photolithography. This review aims to describe the broad applications space covered by laser-based micro- and nanoprocessing techniques and the benefits offered by the use of lasers in micro-manufacturing processes. Given their non-lithographic nature, these processes are also referred to as laser direct-write and constitute some of the earliest demonstrations of 3D printing or additive manufacturing at the microscale. As this review will show, the use of lasers enables precise control of the various types of processing steps—from subtractive to additive—over a wide range of scales with an extensive materials palette. Overall, laser-based direct-write techniques offer multiple modes of operation including the removal (via ablative processes) and addition (via photopolymerization or printing) of most classes of materials using the same equipment in many cases. The versatility provided by these multi-function, multi-material and multi-scale laser micro-manufacturing processes cannot be matched by photolithography nor with other direct-write microfabrication techniques and offer unique opportunities for current and future 3D micro-manufacturing applications.
Microfabricated Fountain Pens for High-Density DNA Arrays
Reese, Matthew O.; van Dam, R. Michae; Scherer, Axel; Quake, Stephen R.
2003-01-01
We used photolithographic microfabrication techniques to create very small stainless steel fountain pens that were installed in place of conventional pens on a microarray spotter. Because of the small feature size produced by the microfabricated pens, we were able to print arrays with up to 25,000 spots/cm2, significantly higher than can be achieved by other deposition methods. This feature density is sufficiently large that a standard microscope slide can contain multiple replicates of every gene in a complex organism such as a mouse or human. We tested carryover during array printing with dye solution, labeled DNA, and hybridized DNA, and we found it to be indistinguishable from background. Hybridization also showed good sequence specificity to printed oligonucleotides. In addition to improved slide capacity, the microfabrication process offers the possibility of low-cost mass-produced pens and the flexibility to include novel pen features that cannot be machined with conventional techniques. PMID:12975313
Nerger, Bryan A.; Siedlik, Michael J.; Nelson, Celeste M.
2016-01-01
Cell-generated forces drive an array of biological processes ranging from wound healing to tumor metastasis. Whereas experimental techniques such as traction force microscopy are capable of quantifying traction forces in multidimensional systems, the physical mechanisms by which these forces induce changes in tissue form remain to be elucidated. Understanding these mechanisms will ultimately require techniques that are capable of quantifying traction forces with high precision and accuracy in vivo or in systems that recapitulate in vivo conditions, such as microfabricated tissues and engineered substrata. To that end, here we review the fundamentals of traction forces, their quantification, and the use of microfabricated tissues designed to study these forces during cell migration and tissue morphogenesis. We emphasize the differences between traction forces in two- and three-dimensional systems, and highlight recently developed techniques for quantifying traction forces. PMID:28008471
Microfabricated fuel heating value monitoring device
Robinson, Alex L [Albuquerque, NM; Manginell, Ronald P [Albuquerque, NM; Moorman, Matthew W [Albuquerque, NM
2010-05-04
A microfabricated fuel heating value monitoring device comprises a microfabricated gas chromatography column in combination with a catalytic microcalorimeter. The microcalorimeter can comprise a reference thermal conductivity sensor to provide diagnostics and surety. Using microfabrication techniques, the device can be manufactured in production quantities at a low per-unit cost. The microfabricated fuel heating value monitoring device enables continuous calorimetric determination of the heating value of natural gas with a 1 minute analysis time and 1.5 minute cycle time using air as a carrier gas. This device has applications in remote natural gas mining stations, pipeline switching and metering stations, turbine generators, and other industrial user sites. For gas pipelines, the device can improve gas quality during transfer and blending, and provide accurate financial accounting. For industrial end users, the device can provide continuous feedback of physical gas properties to improve combustion efficiency during use.
Microfabricated Nickel Based Sensors for Hostile and High Pressure Environments
NASA Astrophysics Data System (ADS)
Holt, Christopher Michael Bjustrom
This thesis outlines the development of two platforms for integrating microfabricated sensors with high pressure feedthroughs for application in hostile high temperature high pressure environments. An application in oil well production logging is explored and two sensors were implemented with these platforms for application in an oil well. The first platform developed involved microfabrication directly onto a cut and polished high pressure feedthrough. This technique enables a system that is more robust than the wire bonded silicon die technique used for MEMS integration in pressure sensors. Removing wire bonds from the traditional MEMS package allows for direct interface of a microfabricated sensor with a hostile high pressure fluid environment which is not currently possible. During the development of this platform key performance metrics included pressure testing to 70MPa and temperature cycling from 20°C to 200°C. This platform enables electronics integration with a variety of microfabricated electrical and thermal based sensors which can be immersed within the oil well environment. The second platform enabled free space fabrication of nickel microfabricated devices onto an array of pins using a thick tin sacrificial layer. This technique allowed microfabrication of metal MEMS that are released by distances of 1cm from their substrate. This method is quite flexible and allows for fabrication to be done on any pin array substrate regardless of surface quality. Being able to place released MEMS sensors directly onto traditional style circuit boards, ceramic circuit boards, electrical connectors, ribbon cables, pin headers, or high pressure feedthroughs greatly improves the variety of possible applications and reduces fabrication costs. These two platforms were then used to fabricate thermal conductivity sensors that showed excellent performance for distinguishing between oil, water, and gas phases. Testing was conducted at various flow rates and performance of the released platform was shown to be better than the performance seen in the anchored sensors while both platforms were significantly better than a simply fabricated wrapped wire sensor. The anchored platform was also used to demonstrate a traditional capacitance based fluid dielectric sensor which was found to work similarly to conventional commercial capacitance probes while being significantly smaller in size.
Mannino, Robert G; Santiago-Miranda, Adriana N; Pradhan, Pallab; Qiu, Yongzhi; Mejias, Joscelyn C; Neelapu, Sattva S; Roy, Krishnendu; Lam, Wilbur A
2017-01-31
Diffuse large B-cell lymphoma (DLBCL) is an aggressive cancer that affects ∼22 000 people in the United States yearly. Understanding the complex cellular interactions of the tumor microenvironment is critical to the success and development of DLBCL treatment strategies. In vitro platforms that successfully model the complex tumor microenvironment without introducing the variability of in vivo systems are vital for understanding these interactions. To date, no such in vitro model exists that can accurately recapitulate the interactions that occur between immune cells, cancer cells, and endothelial cells in the tumor microenvironment of DLBCL. To that end, we developed a lymphoma-on-chip model consisting of a hydrogel based tumor model traversed by a vascularized, perfusable, round microchannel that successfully recapitulates key complexities and interactions of the in vivo tumor microenvironment in vitro. We have shown that the perfusion capabilities of this technique allow us to study targeted treatment strategies, as well as to model the diffusion of infused reagents spatiotemporally. Furthermore, this model employs a novel fabrication technique that utilizes common laboratory materials, and allows for the microfabrication of multiplex microvascular environments without the need for advanced microfabrication facilities. Through our facile microfabrication process, we are able to achieve micro vessels within a tumor model that are highly reliable and precise over the length of the vessel. Overall, we have developed a tool that enables researchers from many diverse disciplines to study previously inaccessible aspects of the DLBCL tumor microenvironment, with profound implications for drug delivery and design.
Mannino, Robert G.; Santiago-Miranda, Adriana N.; Pradhan, Pallab; Qiu, Yongzhi; Mejias, Joscelyn C.; Neelapu, Sattva S.; Roy, Krishnendu; Lam, Wilbur A.
2017-01-01
Diffuse large B-cell lymphoma (DLBCL) is an aggressive cancer that affects ~22,000 people in the United States yearly. Understanding the complex cellular interactions of the tumor microenvironment is critical to the success and development of DLBCL treatment strategies. In vitro platforms that successfully model the complex tumor microenvironment without introducing the variability of in vivo systems are vital for understanding these interactions. To date, no such in vitro model exists that can accurately recapitulate the interactions that occur between immune cells, cancer cells, and endothelial cells in the tumor microenvironment of DLBCL. To that end, we developed a lymphoma-on-chip model consisting of a hydrogel based tumor model traversed by a vascularized, perfusable, round microchannel that successfully recapitulates key complexities and interactions of the in vivo tumor microenvironment in vitro. We have shown that the perfusion capabilities of this technique allow us to study targeted treatment strategies, as well as to model the diffusion of infused reagents spatiotemporally. Furthermore, this model employs a novel fabrication technique that utilizes common laboratory materials, and allows for the microfabrication of multiplex microvascular environments without the need for advanced microfabrication facilities. Through our facile microfabrication process, we are able to achieve micro vessels within a tumor model that are highly reliable and precise over the length of the vessel. Overall, we have developed a tool that enables researchers from many diverse disciplines to study previously inaccessible aspects of the DLBCL tumor microenvironment, with profound implications for drug delivery and design. PMID:28054086
3-D Printing as an Effective Educational Tool for MEMS Design and Fabrication
ERIC Educational Resources Information Center
Dahle, Reena; Rasel, Rafiul
2016-01-01
This paper presents a series of course modules developed as a high-impact and cost-effective learning tool for modeling and simulating the microfabrication process and design of microelectromechanical systems (MEMS) devices using three-dimensional (3-D) printing. Microfabrication technology is an established fabrication technique for small and…
Microfabricated ion trap array
Blain, Matthew G [Albuquerque, NM; Fleming, James G [Albuquerque, NM
2006-12-26
A microfabricated ion trap array, comprising a plurality of ion traps having an inner radius of order one micron, can be fabricated using surface micromachining techniques and materials known to the integrated circuits manufacturing and microelectromechanical systems industries. Micromachining methods enable batch fabrication, reduced manufacturing costs, dimensional and positional precision, and monolithic integration of massive arrays of ion traps with microscale ion generation and detection devices. Massive arraying enables the microscale ion traps to retain the resolution, sensitivity, and mass range advantages necessary for high chemical selectivity. The reduced electrode voltage enables integration of the microfabricated ion trap array with on-chip circuit-based rf operation and detection electronics (i.e., cell phone electronics). Therefore, the full performance advantages of the microfabricated ion trap array can be realized in truly field portable, handheld microanalysis systems.
Emerging technologies in microguidance and control
NASA Technical Reports Server (NTRS)
Weinberg, Marc S.
1993-01-01
Employing recent advances in microfabrication, the Charles Stark Draper Laboratory has developed inertial guidance instruments of very small size and low cost. Microfabrication employs the batch processing techniques of solid state electronics, such as photolithography, diffusion, and etching, to carve mechanical parts. Within a few years, microfabricated gyroscopes should perform in the 10 to 100 deg/h range. Microfabricated accelerometers have demonstrated performance in the 50 to 500 microgravity range. These instruments will result in not only the redesign of conventional military products, but also new applications that could not exist without small, inexpensive sensors and computing. Draper's microfabricated accelerometers and gyroscopes will be described and test results summarized. Associated electronics and control issues will also be addressed. Gimballed, vibrating gyroscopes and force rebalance accelerometers constructed from bulk silicon, polysilicon surface-machined tuning fork gyroscopes, and quartz resonant accelerometers and gyroscopes are examined. Draper is pursuing several types of devices for the following reasons: to address wide ranges of performance, to realize construction in a flat pack, and to lessen the risks associated with emerging technologies.
Broadband moth-eye antireflection coatings on silicon
NASA Astrophysics Data System (ADS)
Sun, Chih-Hung; Jiang, Peng; Jiang, Bin
2008-02-01
We report a bioinspired templating technique for fabricating broadband antireflection coatings that mimic antireflective moth eyes. Wafer-scale, subwavelength-structured nipple arrays are directly patterned on silicon using spin-coated silica colloidal monolayers as etching masks. The templated gratings exhibit excellent broadband antireflection properties and the normal-incidence specular reflection matches with the theoretical prediction using a rigorous coupled-wave analysis (RCWA) model. We further demonstrate that two common simulation methods, RCWA and thin-film multilayer models, generate almost identical prediction for the templated nipple arrays. This simple bottom-up technique is compatible with standard microfabrication, promising for reducing the manufacturing cost of crystalline silicon solar cells.
NASA Astrophysics Data System (ADS)
Cicak, Katarina; Lecocq, Florent; Ranzani, Leonardo; Peterson, Gabriel A.; Kotler, Shlomi; Teufel, John D.; Simmonds, Raymond W.; Aumentado, Jose
Recent developments in coupled mode theory have opened the doors to new nonreciprocal amplification techniques that can be directly leveraged to produce high quantum efficiency in current measurements in microwave quantum information. However, taking advantage of these techniques requires flexible multi-mode circuit designs comprised of low-loss materials that can be implemented using common fabrication techniques. In this talk we discuss the design and fabrication of a new class of multi-pole lumped-element superconducting parametric amplifiers based on Nb/Al-AlOx/Nb Josephson junctions on silicon or sapphire. To reduce intrinsic loss in these circuits we utilize PECVD amorphous silicon as a low-loss dielectric (tanδ 5 ×10-4), resulting in nearly quantum-limited directional amplification.
Microfabrication Techniques for Plastic Microelectromechanical Systems (MEMS)
2003-07-01
micromachining techniques were investigated. Surface micromachining techniques include deposition of thin and thick polymer films using vacuum and spin ...1 2.0 Introduction ...100 4.3.1 Nozzle-diffuser pumps theory
Microfabricated magnetic structures for future medicine: from sensors to cell actuators
Vitol, Elina A; Novosad, Valentyn; Rozhkova, Elena A
2013-01-01
In this review, we discuss the prospective medical application of magnetic carriers microfabricated by top-down techniques. Physical methods allow the fabrication of a variety of magnetic structures with tightly controlled magnetic properties and geometry, which makes them very attractive for a cost-efficient mass-production in the fast growing field of nanomedicine. Stand-alone fabricated particles along with integrated devices combining lithographically defined magnetic structures and synthesized magnetic tags will be considered. Applications of microfabricated multifunctional magnetic structures for future medicinal purposes range from ultrasensitive in vitro diagnostic bioassays, DNA sequencing and microfluidic cell sorting to magnetomechanical actuation, cargo delivery, contrast enhancement and heating therapy. PMID:23148542
NASA Astrophysics Data System (ADS)
Han, Jin; Kim, Jong-Wook; Lee, Hiwon; Min, Byung-Kwon; Lee, Sang Jo
2009-02-01
A new microfabrication method that combines localized ion implantation and magnetorheological finishing is proposed. The proposed technique involves two steps. First, selected regions of a silicon wafer are irradiated with gallium ions by using a focused ion beam system. The mechanical properties of the irradiated regions are altered as a result of the ion implantation. Second, the wafer is processed by using a magnetorheological finishing method. During the finishing process, the regions not implanted with ion are preferentially removed. The material removal rate difference is utilized for microfabrication. The mechanisms of the proposed method are discussed, and applications are presented.
Parylene C as a Sacrificial Material for Microfabrication
NASA Technical Reports Server (NTRS)
Beamesderfer, Michael
2005-01-01
Parylene C has been investigated for use as a sacrificial material in microfabrication. Although Parylene C cannot be patterned lithographically like photoresists, it nevertheless extends the range of processing options by offering a set of properties that are suitable for microfabrication and are complementary to those of photoresists. The compatibility of Parylene C with several microfabrication processes was demonstrated in experiments in which a thin film of Parylene C was deposited on a silicon wafer, then several thin metal films were deposited and successfully patterned, utilizing the Parylene C pads as a sacrificial layer. The term "parylene" -- a contraction of "poly(para-xylene)" -- denotes a family of vapor-deposited polymers. In Parylene C (the most common form of parylene), a chlorine atom is substituted for one of the hydrogen atoms on the benzene ring of each para-xylene moiety. Heretofore, parylenes have been used as conformal coating materials in diverse applications.
Nanoporous Gold: Fabrication, Characterization, and Applications
Seker, Erkin; Reed, Michael L.; Begley, Matthew R.
2009-01-01
Nanoporous gold (np-Au) has intriguing material properties that offer potential benefits for many applications due to its high specific surface area, well-characterized thiol-gold surface chemistry, high electrical conductivity, and reduced stiffness. The research on np-Au has taken place on various fronts, including advanced microfabrication and characterization techniques to probe unusual nanoscale properties and applications spanning from fuel cells to electrochemical sensors. Here, we provide a review of the recent advances in np-Au research, with special emphasis on microfabrication and characterization techniques. We conclude the paper with a brief outline of challenges to overcome in the study of nanoporous metals.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Ravelo Arias, S. I.; Ramírez Muñoz, D.; Cardoso, S.
2015-06-15
The work shows a measurement technique to obtain the correct value of the four elements in a resistive Wheatstone bridge without the need to separate the physical connections existing between them. Two electronic solutions are presented, based on a source-and-measure unit and using discrete electronic components. The proposed technique brings the possibility to know the mismatching or the tolerance between the bridge resistive elements and then to pass or reject it in terms of its related common-mode rejection. Experimental results were taken in various Wheatstone resistive bridges (discrete and magnetoresistive integrated bridges) validating the proposed measurement technique specially when themore » bridge is micro-fabricated and there is no physical way to separate one resistive element from the others.« less
A 3D-Printed Sensor for Monitoring Biosignals in Small Animals
Byun, Donghak; Choi, Seok-Yong; Lee, Byung-Geun; Kim, Myeong-Kyu
2017-01-01
Although additive manufacturing technologies, also known as 3D printing, were first introduced in the 1980s, they have recently gained remarkable popularity owing to decreased costs. 3D printing has already emerged as a viable technology in many industries; in particular, it is a good replacement for microfabrication technology. Microfabrication technology usually requires expensive clean room equipment and skilled engineers; however, 3D printing can reduce both cost and time dramatically. Although 3D printing technology has started to emerge into microfabrication manufacturing and medical applications, it is typically limited to creating mechanical structures such as hip prosthesis or dental implants. There have been increased interests in wearable devices and the critical part of such wearable devices is the sensing part to detect biosignals noninvasively. In this paper, we have built a 3D-printed sensor that can measure electroencephalogram and electrocardiogram from zebrafish. Despite measuring biosignals noninvasively from zebrafish has been known to be difficult due to that it is an underwater creature, we were able to successfully obtain electrophysiological information using the 3D-printed sensor. This 3D printing technique can accelerate the development of simple noninvasive sensors using affordable equipment and provide an economical solution to physiologists who are unfamiliar with complicated microfabrication techniques. PMID:29209491
Microfabrication of High Resolution X-ray Magnetic Calorimeters
NASA Astrophysics Data System (ADS)
Hsieh, Wen-Ting; Bandler, Simon R.; Kelly, Daniel P.; Porst, Jan P.; Rotzinger, Hannes; Seidel, George M.; Stevenson, Thomas R.
2009-12-01
Metallic magnetic calorimeter (MMC) is one of the most promising x-ray detector technologies for providing the very high energy resolution needed for future astronomical x-ray imaging spectroscopy. For this purpose, we have developed micro-fabricated 5×5 arrays of MMC of which each individual pixel has excellent energy resolution as good as 3.4 eV at 6 keV x-ray. Here we report on the fabrication techniques developed to achieve good resolution and high efficiency. These include: processing of a thin insulation layer for strong magnetic coupling between the AuEr sensor film and the niobium pick-up coil; production of overhanging absorbers for enhanced efficiency of x-ray absorption; fabrication on SiN membranes to minimize the effects on energy resolution from athermal phonon loss. We have also improved the deposition of the magnetic sensor film such that the film magnetization is nearly completely that is expected from the AuEr sputter target bulk material. In addition, we have included a study of a positional sensitive design, the Hydra design, which allows thermal coupling of four absorbers to a common MMC sensor and circuit.
Practical, microfabrication-free device for single-cell isolation.
Lin, Liang-I; Chao, Shih-Hui; Meldrum, Deirdre R
2009-08-21
Microfabricated devices have great potential in cell-level studies, but are not easily accessible for the broad biology community. This paper introduces the Microscale Oil-Covered Cell Array (MOCCA) as a low-cost device for high throughput single-cell analysis that can be easily produced by researchers without microengineering knowledge. Instead of using microfabricated structures to capture cells, MOCCA isolates cells in discrete aqueous droplets that are separated by oil on patterned hydrophilic areas across a relatively more hydrophobic substrate. The number of randomly seeded Escherichia coli bacteria in each discrete droplet approaches single-cell levels. The cell distribution on MOCCA is well-fit with Poisson distribution. In this pioneer study, we created an array of 900-picoliter droplets. The total time needed to seed cells in approximately 3000 droplets was less than 10 minutes. Compared to traditional microfabrication techniques, MOCCA dramatically lowers the cost of microscale cell arrays, yet enhances the fabrication and operational efficiency for single-cell analysis.
Piecewise uniform conduction-like flow channels and method therefor
Cummings, Eric B [Livermore, CA; Fiechtner, Gregory J [Livermore, CA
2006-02-28
A low-dispersion methodology for designing microfabricated conduction channels for on-chip electrokinetic-based systems is presented. The technique relies on trigonometric relations that apply for ideal electrokinetic flows, allowing faceted channels to be designed on chips using common drafting software and a hand calculator. Flows are rotated and stretched along the abrupt interface between adjacent regions with differing permeability. Regions bounded by interfaces form flow "prisms" that can be combined with other designed prisms to obtain a wide range of turning angles and expansion ratios while minimizing dispersion. Designs are demonstrated using two-dimensional numerical solutions of the Laplace equation.
Alvarez-Escobar, Marta; Hansford, Derek; Monteiro, Fernando J.
2018-01-01
Introduction Microfabrication offers opportunities to study surface concepts focused to reduce bacterial adhesion on implants using human minimally invasive rapid screening (hMIRS). Wide information is available about cell/biomaterial interactions using eukaryotic and prokaryotic cells on surfaces of dental materials with different topographies, but studies using human being are still limited. Objective To evaluate a synergy of microfabrication and hMIRS to study the bacterial adhesion on micropatterned surfaces for dental materials. Materials and Methods Micropatterned and flat surfaces on biomedical PDMS disks were produced by soft lithography. The hMIRS approach was used to evaluate the total oral bacterial adhesion on PDMS surfaces placed in the oral cavity of five volunteers (the study was approved by the University Ethical Committee). After 24 h, the disks were analyzed using MTT assay and light microscopy. Results In the present pilot study, microwell structures were microfabricated on the PDMS surface via soft lithography with a spacing of 5 µm. Overall, bacterial adhesion did not significantly differ between the flat and micropatterned surfaces. However, individual analysis of two subjects showed greater bacterial adhesion on the micropatterned surfaces than on the flat surfaces. Significance Microfabrication and hMIRS might be implemented to study the cell/biomaterial interactions for dental materials. PMID:29593793
Microfabricated linear Paul-Straubel ion trap
Mangan, Michael A [Albuquerque, NM; Blain, Matthew G [Albuquerque, NM; Tigges, Chris P [Albuquerque, NM; Linker, Kevin L [Albuquerque, NM
2011-04-19
An array of microfabricated linear Paul-Straubel ion traps can be used for mass spectrometric applications. Each ion trap comprises two parallel inner RF electrodes and two parallel outer DC control electrodes symmetric about a central trap axis and suspended over an opening in a substrate. Neighboring ion traps in the array can share a common outer DC control electrode. The ions confined transversely by an RF quadrupole electric field potential well on the ion trap axis. The array can trap a wide array of ions.
Laser subtractive-additive-welding microfabrication for Lab-On-Chip (LOC) applications
NASA Astrophysics Data System (ADS)
Jonušauskas, Linas; RekštytÄ--, Sima; Buivydas, Ričardas; Butkus, Simas; Paipulas, Domas; Gadonas, Roaldas; Juodkazis, Saulius; Malinauskas, Mangirdas
2017-02-01
An approach employing ultrafast laser hybrid microfabrication combining ablation, 3D nanolithography and welding is proposed for the realization of Lab-On-Chip (LOC) device. The same laser setup is shown to be suitable for fabricating microgrooves in glass slabs, polymerization of fine meshes inside them, and, lastly, sealing the whole chip with cover glass into one monolithic piece. The created micro fluidic device proved its particle sorting function by separating 1 μm and 10 μm polystyrene spheres from a mixture. Next, a lens adapter for a cell phone's camera was manufactured via thermal extrusion 3D printing technique which allowed to achieve sufficient magnification to clearly resolve <10 μm features. All together shows fs-laser microfabrication technology as a flexible and versatile tool for study and manufacturing of Lab-On-Chip devices.
Silicon micro-fabricated miniature polymer electrolyte fuel cells
NASA Astrophysics Data System (ADS)
Kelley, Shawn Christopher
2000-10-01
The present thesis relates the design, fabrication, and testing of a unique type of silicon-based, miniature fuel cell. The fuel cell electrodes were constructed using standard silicon micro-fabrication techniques, and were used to construct miniature polymer electrolyte fuel cells (PEFCs) using NafionRTM. During testing, methanol and oxygen were the common reactants, but hydrogen and oxygen could be used as well. A novel form of an electrodeposited Pt:Ru alloy was developed for use as a methanol electrooxidation catalyst in the mini-PEFCs. An optimized mini-PEFC design was developed, tested, and compared with large PEFCs on the basis of performance. Mini-PEFC performance was equivalent to that of large PEFCs when scaled for active-area, but was limited by the function of the oxygen electrode. The rate of methanol crossover in a methanol/oxygen mini-PEFC was predicted using Fick's first law and the electrode chip feed-hole area. It was shown that the present mini-PEFC design could function as a fuel cell material test structure. Additionally, the mini-PEFCs were tested as two-cell stacks and as methanol sensors. The miniature, silicon-based PEFCs developed here successfully incorporate the essential aspects of a large PEFC in a smaller, simpler design.
NASA Astrophysics Data System (ADS)
Curry, Kenneth J.; Bennett, Richard H.; Mayer, Lawrence M.; Curry, Ann; Abril, Maritza; Biesiot, Patricia M.; Hulbert, Matthew H.
2007-04-01
We employed direct visualization of organic matter (OM) sequestered by microfabric signatures in organo-clay systems to study mechanisms of OM protection. We studied polysaccharides, an abundant class of OM in marine sediments, associated with the nano- and microfabric of clay sediment using a novel application of transmission electron microscopy, histochemical staining (periodic acid-thiosemicarbazide-silver proteinate), and enzymatic digestion techniques. We used two experimental organo-clay sediment environments. First, laboratory-consolidated sediment with 10% chitin (w/w) added was probed for chitin before and after digestion with chitinase. Second, fecal pellets from the polychaete Heteromastus filiformis were used as a natural environment rich in clay and polysaccharides. Sections of this material were probed with silver proteinate for polysaccharides before and after digestion with a mixture of enzymes (amylase, cellulase, chitinase, dextranase, and pectinase). In both environments, chitin or other polysaccharides were found within pores, bridging clay domains, and attached to clay surfaces in undigested samples. Digested samples showed chitin or polysaccharides more closely associated with clay surfaces and in small pores. Our results imply protective roles for both sorption to clay surfaces and encapsulation within clay microfabric signatures.
Miniaturized flow injection analysis system
Folta, James A.
1997-01-01
A chemical analysis technique known as flow injection analysis, wherein small quantities of chemical reagents and sample are intermixed and reacted within a capillary flow system and the reaction products are detected optically, electrochemically, or by other means. A highly miniaturized version of a flow injection analysis system has been fabricated utilizing microfabrication techniques common to the microelectronics industry. The microflow system uses flow capillaries formed by etching microchannels in a silicon or glass wafer followed by bonding to another wafer, commercially available microvalves bonded directly to the microflow channels, and an optical absorption detector cell formed near the capillary outlet, with light being both delivered and collected with fiber optics. The microflow system is designed mainly for analysis of liquids and currently measures 38.times.25.times.3 mm, but can be designed for gas analysis and be substantially smaller in construction.
Microfabrication and Applications of Opto-Microfluidic Sensors
Zhang, Daiying; Men, Liqiu; Chen, Qiying
2011-01-01
A review of research activities on opto-microfluidic sensors carried out by the research groups in Canada is presented. After a brief introduction of this exciting research field, detailed discussion is focused on different techniques for the fabrication of opto-microfluidic sensors, and various applications of these devices for bioanalysis, chemical detection, and optical measurement. Our current research on femtosecond laser microfabrication of optofluidic devices is introduced and some experimental results are elaborated. The research on opto-microfluidics provides highly sensitive opto-microfluidic sensors for practical applications with significant advantages of portability, efficiency, sensitivity, versatility, and low cost. PMID:22163904
Boutte, Ronald W; Blair, Steve
2016-12-01
Borrowing from the wafer-level fabrication techniques of the Utah Electrode Array, an optical array capable of delivering light for neural optogenetic studies is presented in this paper: the Utah Optrode Array. Utah Optrode Arrays are micromachined out of sheet soda-lime-silica glass using standard backend processes of the semiconductor and microelectronics packaging industries such as precision diamond grinding and wet etching. 9 × 9 arrays with 1100μ m × 100μ m optrodes and a 500μ m back-plane are repeatably reproduced on 2i n wafers 169 arrays at a time. This paper describes the steps and some of the common errors of optrode fabrication.
Microfabricated thermionic detector
Lewis, Patrick R; Manginell, Ronald P; Wheeler, David R; Trudell, Daniel E
2012-10-30
A microfabricated TID comprises a microhotplate and a thermionic source disposed on the microhotplate. The microfabricated TID can provide high sensitivity and selectivity to nitrogen- and phosphorous-containing compounds and other compounds containing electronegative function groups. The microfabricated TID can be microfabricated with semiconductor-based materials. The microfabricated TID can be combined with a microfabricated separation column and used in microanalytical system for the rapid on-site detection of pesticides, chemical warfare agents, explosives, pharmaceuticals, and other organic compounds that contain nitrogen or phosphorus.
Solving the shrinkage-induced PDMS alignment registration issue in multilayer soft lithography
NASA Astrophysics Data System (ADS)
Moraes, Christopher; Sun, Yu; Simmons, Craig A.
2009-06-01
Shrinkage of polydimethylsiloxane (PDMS) complicates alignment registration between layers during multilayer soft lithography fabrication. This often hinders the development of large-scale microfabricated arrayed devices. Here we report a rapid method to construct large-area, multilayered devices with stringent alignment requirements. This technique, which exploits a previously unrecognized aspect of sandwich mold fabrication, improves device yield, enables highly accurate alignment over large areas of multilayered devices and does not require strict regulation of fabrication conditions or extensive calibration processes. To demonstrate this technique, a microfabricated Braille display was developed and characterized. High device yield and accurate alignment within 15 µm were achieved over three layers for an array of 108 Braille units spread over a 6.5 cm2 area, demonstrating the fabrication of well-aligned devices with greater ease and efficiency than previously possible.
Microfabrication of biocompatible hydrogels by proton beam writing
NASA Astrophysics Data System (ADS)
Nagasawa, Naotsugu; Kimura, Atsushi; Idesaki, Akira; Yamada, Naoto; Koka, Masashi; Satoh, Takahiro; Ishii, Yasuyuki; Taguchi, Mitsumasa
2017-10-01
Functionalization of biocompatible materials is expected to be widely applied in biomedical engineering and regenerative medicine fields. Hydrogel has been expected as a biocompatible scaffold which support to keep an organ shape during cell multiplying in regenerative medicine. Therefore, it is important to understanding a surface microstructure (minute shape, depth of flute) and a chemical characteristic of the hydrogel affecting the cell culture. Here, we investigate the microfabrication of biocompatible polymeric materials, such as the water-soluble polysaccharide derivatives hydroxypropyl cellulose and carboxymethyl cellulose, by use of proton beam writing (PBW). These polymeric materials were dissolved thoroughly in pure water using a planetary centrifugal mixer, and a sample sheet (1 mm thick) was formed on polyethylene terephthalate (PET) film. Crosslinking to form hydrogels was induced using a 3.0 MeV focused proton beam from the single-ended accelerator at Takasaki Ion Accelerators for Advanced Radiation Application. The aqueous samples were horizontally irradiated with the proton beam through the PET cover film, and then rinsed with deionized water. Microstructured hydrogels were obtained on the PET film using the PBW technique without toxic crosslinking reagents. Cell adhesion and proliferation on the microfabricated biocompatible hydrogels were investigated. Microfabrication of HPC and CMC by the use of PBW is expected to produce new biocompatible materials that can be applied in biological and medical applications.
Lithography Assisted Fiber-Drawing Nanomanufacturing
Gholipour, Behrad; Bastock, Paul; Cui, Long; Craig, Christopher; Khan, Khouler; Hewak, Daniel W.; Soci, Cesare
2016-01-01
We present a high-throughput and scalable technique for the production of metal nanowires embedded in glass fibres by taking advantage of thin film properties and patterning techniques commonly used in planar microfabrication. This hybrid process enables the fabrication of single nanowires and nanowire arrays encased in a preform material within a single fibre draw, providing an alternative to costly and time-consuming iterative fibre drawing. This method allows the combination of materials with different thermal properties to create functional optoelectronic nanostructures. As a proof of principle of the potential of this technique, centimetre long gold nanowires (bulk Tm = 1064 °C) embedded in silicate glass fibres (Tg = 567 °C) were drawn in a single step with high aspect ratios (>104); such nanowires can be released from the glass matrix and show relatively high electrical conductivity. Overall, this fabrication method could enable mass manufacturing of metallic nanowires for plasmonics and nonlinear optics applications, as well as the integration of functional multimaterial structures for completely fiberised optoelectronic devices. PMID:27739543
Lithography Assisted Fiber-Drawing Nanomanufacturing
NASA Astrophysics Data System (ADS)
Gholipour, Behrad; Bastock, Paul; Cui, Long; Craig, Christopher; Khan, Khouler; Hewak, Daniel W.; Soci, Cesare
2016-10-01
We present a high-throughput and scalable technique for the production of metal nanowires embedded in glass fibres by taking advantage of thin film properties and patterning techniques commonly used in planar microfabrication. This hybrid process enables the fabrication of single nanowires and nanowire arrays encased in a preform material within a single fibre draw, providing an alternative to costly and time-consuming iterative fibre drawing. This method allows the combination of materials with different thermal properties to create functional optoelectronic nanostructures. As a proof of principle of the potential of this technique, centimetre long gold nanowires (bulk Tm = 1064 °C) embedded in silicate glass fibres (Tg = 567 °C) were drawn in a single step with high aspect ratios (>104) such nanowires can be released from the glass matrix and show relatively high electrical conductivity. Overall, this fabrication method could enable mass manufacturing of metallic nanowires for plasmonics and nonlinear optics applications, as well as the integration of functional multimaterial structures for completely fiberised optoelectronic devices.
Miniaturized flow injection analysis system
Folta, J.A.
1997-07-01
A chemical analysis technique known as flow injection analysis is described, wherein small quantities of chemical reagents and sample are intermixed and reacted within a capillary flow system and the reaction products are detected optically, electrochemically, or by other means. A highly miniaturized version of a flow injection analysis system has been fabricated utilizing microfabrication techniques common to the microelectronics industry. The microflow system uses flow capillaries formed by etching microchannels in a silicon or glass wafer followed by bonding to another wafer, commercially available microvalves bonded directly to the microflow channels, and an optical absorption detector cell formed near the capillary outlet, with light being both delivered and collected with fiber optics. The microflow system is designed mainly for analysis of liquids and currently measures 38{times}25{times}3 mm, but can be designed for gas analysis and be substantially smaller in construction. 9 figs.
Zachek, Matthew K.; Park, Jinwoo; Takmakov, Pavel; Wightman, R. Mark; McCarty, Gregory S.
2010-01-01
Fast scan cyclic voltammetry (FSCV) has been used previously to detect neurotransmitter release and reuptake in vivo. An advantage that FSCV has over other electrochemical techniques is its ability to distinguish neurotransmitters of interest (i.e. monoamines) from their metabolites using their respective characteristic cyclic voltammogram. While much has been learned with this technique, it has generally only been used in a single working electrode arrangement. Additionally, traditional electrode fabrication techniques tend to be difficult and somewhat irreproducible. Described in this report is a fabrication method for a FSCV compatible microelectrode array (FSCV-MEA) that is capable of functioning in vivo. The microfabrication techniques employed here allow for better reproducibility than traditional fabrication methods of carbon fiber microelectrodes, and enable batch fabrication of electrode arrays. The reproducibility and electrochemical qualities of the probes were assessed along with cross talk in vitro. Heterogeneous release of electrically stimulated dopamine was observed in real-time in the striatum of an anesthetized rat using the FSCV-MEA. The heterogeneous effects of pharmacology on the striatum was also observed and shown to be consistent across multiple animals. PMID:20464031
Microfabrication of an Implantable silicone Microelectrode array for an epiretinal prosthesis
DOE Office of Scientific and Technical Information (OSTI.GOV)
Maghribi, Mariam Nader
2003-06-10
Millions of people suffering from diseases such as retinitis pigmentosa and macular degeneration are legally blind due to the loss of photoreceptor function. Fortunately a large percentage of the neural cells connected to the photoreceptors remain viable, and electrical stimulation of these cells has been shown to result in visual perception. These findings have generated worldwide efforts to develop a retinal prosthesis device, with the hope of restoring vision. Advances in microfabrication, integrated circuits, and wireless technologies provide the means to reach this challenging goal. This dissertation describes the development of innovative silicone-based microfabrication techniques for producing an implantable microelectrodemore » array. The microelectrode array is a component of an epiretinal prosthesis being developed by a multi-laboratory consortium. This array will serve as the interface between an electronic imaging system and the human eye, directly stimulating retinal neurons via thin film conducting traces. Because the array is intended as a long-term implant, vital biological and physical design requirements must be met. A retinal implant poses difficult engineering challenges due to the size of the intraocular cavity and the delicate retina. Not only does it have to be biocompatible in terms of cytotoxicity and degradation, but it also has to be structurally biocompatible, with regard to smooth edges and high conformability; basically mimicking the biological tissue. This is vital to minimize stress and prevent physical damage to the retina. Also, the device must be robust to withstand the forces imposed on it during fabrication and implantation. In order to meet these biocompatibility needs, the use of non-conventional microfabrication materials such as silicone is required. This mandates the enhancement of currently available polymer-based fabrication techniques and the development of new microfabrication methods. Through an iterative process, devices were designed, fabricated, tested and implanted into a canine eye. Metal traces were embedded within a thin substrate fabricated using poly (dimethyl siloxane) (PDMS), an inert biocompatible elastomeric material with high oxygen permeability and low water permeability. Due to its highly conformable nature, PDMS contacted the curved retinal surface uniformly. Fundamental material characteristics were examined to develop reliable and repeatable fabrication processes.« less
Microfabricated Chemical Sensors for Aerospace Fire Detection Applications
NASA Technical Reports Server (NTRS)
Hunter, Gary W.; Neudeck, Philip G.; Fralick, Gustave; Thomas, Valarie; Makel, D.; Liu, C. C.; Ward, B.; Wu, Q. H.
2001-01-01
The detection of fires on-board commercial aircraft is extremely important for safety reasons. Although dependable fire detection equipment presently exists within the cabin, detection of fire within the cargo hold has been less reliable and susceptible to false alarms. A second, independent method of fire detection to complement the conventional smoke detection techniques, such as the measurement of chemical species indicative of a fire, will help reduce false alarms and improve aircraft safety. Although many chemical species are indicative of a fire, two species of particular interest are CO and CO2. This paper discusses microfabricated chemical sensor development tailored to meet the needs of fire safety applications. This development is based on progress in three types of technology: 1) Micromachining and microfabrication (Microsystem) technology to fabricate miniaturized sensors. 2) The use of nanocrystalline materials to develop sensors with improved stability combined with higher sensitivity. 3) The development of high temperature semiconductors, especially silicon carbide. The individual sensor being developed and their level of maturity will be presented.
A microfabricated optically-pumped magnetic gradiometer
NASA Astrophysics Data System (ADS)
Sheng, D.; Perry, A. R.; Krzyzewski, S. P.; Geller, S.; Kitching, J.; Knappe, S.
2017-01-01
We report on the development of a microfabricated atomic magnetic gradiometer based on optical spectroscopy of alkali atoms in the vapor phase. The gradiometer, which operates in the spin-exchange relaxation free regime, has a length of 60 mm and cross sectional diameter of 12 mm, and consists of two chip-scale atomic magnetometers which are interrogated by a common laser light. The sensor can measure differences in magnetic fields, over a 20 mm baseline, of 10 fT/ Hz1 /2 at frequencies above 20 Hz. The maximum rejection of magnetic field noise is 1000 at 10 Hz. By use of a set of compensation coils wrapped around the sensor, we also measure the sensor sensitivity at several external bias field strengths up to 150 mG. This device is useful for applications that require both sensitive gradient field information and high common-mode noise cancellation.
Dielectrophoretic manipulation of particles for use in microfluidic devices
DOE Office of Scientific and Technical Information (OSTI.GOV)
Belgrader, P; Bettencourt, K; Hamilton, J
1999-06-23
Amplification and hybridization of DNA are commonly used techniques to verify the presence of a specific DNA sequence in a test sample. Automatic sample handling to concentrate and purify sample prior to amplification is desirable both from the cost standpoint and from the standpoint of reducing the possibility of sample contamination. This paper explores the use of the dielectrophoretic force to manipulate DNA, Bacillus globigii spores, and Erwinia herbicola bacteria to provide concentration and purification as part of the sample handling functions in biological monitoring equipment. It was found that for what would be considered a typical microfabricated structure withmore » electrode gaps at 30 {micro}m operating at 5V, that concentration of the particles is very effective.« less
A three dimensional scaffold with precise micro-architecture and surface micro-textures
Mata, Alvaro; Kim, Eun Jung; Boehm, Cynthia A.; Fleischman, Aaron J.; Muschler, George F.; Roy, Shuvo
2013-01-01
A three-dimensional (3D) structure comprising precisely defined microarchitecture and surface micro-textures, designed to present specific physical cues to cells and tissues, may provide an efficient scaffold in a variety of tissue engineering and regenerative medicine applications. We report a fabrication technique based on microfabrication and soft lithography that permits for the development of 3D scaffolds with both precisely engineered architecture and tailored surface topography. The scaffold fabrication technique consists of three key steps starting with microfabrication of a mold using an epoxy-based photoresist (SU-8), followed by dual-sided molding of a single layer of polydimethylsiloxane (PDMS) using a mechanical jig for precise motion control; and finally, alignment, stacking, and adhesion of multiple PDMS layers to achieve a 3D structure. This technique was used to produce 3D Texture and 3D Smooth PDMS scaffolds, where the surface topography comprised 10 μm-diameter/height posts and smooth surfaces, respectively. The potential utility of the 3D microfabricated scaffolds, and the role of surface topography, were subsequently investigated in vitro with a combined heterogeneous population of adult human stem cells and their resultant progenitor cells, collectively termed connective tissue progenitors (CTPs), under conditions promoting the osteoblastic phenotype. Examination of bone-marrow derived CTPs cultured on the 3D Texture scaffold for 9 days revealed cell growth in three dimensions and increased cell numbers compared to those on the 3D Smooth scaffold. Furthermore, expression of alkaline phosphatase mRNA was higher on the 3D Texture scaffold, while osteocalcin mRNA expression was comparable for both types of scaffolds. PMID:19524292
Fabrication, Densification, and Replica Molding of 3D Carbon Nanotube Microstructures
Copic, Davor; Park, Sei Jin; Tawfick, Sameh; De Volder, Michael; Hart, A. John
2012-01-01
The introduction of new materials and processes to microfabrication has, in large part, enabled many important advances in microsystems, lab-on-a-chip devices, and their applications. In particular, capabilities for cost-effective fabrication of polymer microstructures were transformed by the advent of soft lithography and other micromolding techniques 1, 2, and this led a revolution in applications of microfabrication to biomedical engineering and biology. Nevertheless, it remains challenging to fabricate microstructures with well-defined nanoscale surface textures, and to fabricate arbitrary 3D shapes at the micro-scale. Robustness of master molds and maintenance of shape integrity is especially important to achieve high fidelity replication of complex structures and preserving their nanoscale surface texture. The combination of hierarchical textures, and heterogeneous shapes, is a profound challenge to existing microfabrication methods that largely rely upon top-down etching using fixed mask templates. On the other hand, the bottom-up synthesis of nanostructures such as nanotubes and nanowires can offer new capabilities to microfabrication, in particular by taking advantage of the collective self-organization of nanostructures, and local control of their growth behavior with respect to microfabricated patterns. Our goal is to introduce vertically aligned carbon nanotubes (CNTs), which we refer to as CNT "forests", as a new microfabrication material. We present details of a suite of related methods recently developed by our group: fabrication of CNT forest microstructures by thermal CVD from lithographically patterned catalyst thin films; self-directed elastocapillary densification of CNT microstructures; and replica molding of polymer microstructures using CNT composite master molds. In particular, our work shows that self-directed capillary densification ("capillary forming"), which is performed by condensation of a solvent onto the substrate with CNT microstructures, significantly increases the packing density of CNTs. This process enables directed transformation of vertical CNT microstructures into straight, inclined, and twisted shapes, which have robust mechanical properties exceeding those of typical microfabrication polymers. This in turn enables formation of nanocomposite CNT master molds by capillary-driven infiltration of polymers. The replica structures exhibit the anisotropic nanoscale texture of the aligned CNTs, and can have walls with sub-micron thickness and aspect ratios exceeding 50:1. Integration of CNT microstructures in fabrication offers further opportunity to exploit the electrical and thermal properties of CNTs, and diverse capabilities for chemical and biochemical functionalization 3. PMID:22806089
Fabrication, densification, and replica molding of 3D carbon nanotube microstructures.
Copic, Davor; Park, Sei Jin; Tawfick, Sameh; De Volder, Michael; Hart, A John
2012-07-02
The introduction of new materials and processes to microfabrication has, in large part, enabled many important advances in microsystems, lab-on-a-chip devices, and their applications. In particular, capabilities for cost-effective fabrication of polymer microstructures were transformed by the advent of soft lithography and other micromolding techniques (1, 2), and this led a revolution in applications of microfabrication to biomedical engineering and biology. Nevertheless, it remains challenging to fabricate microstructures with well-defined nanoscale surface textures, and to fabricate arbitrary 3D shapes at the micro-scale. Robustness of master molds and maintenance of shape integrity is especially important to achieve high fidelity replication of complex structures and preserving their nanoscale surface texture. The combination of hierarchical textures, and heterogeneous shapes, is a profound challenge to existing microfabrication methods that largely rely upon top-down etching using fixed mask templates. On the other hand, the bottom-up synthesis of nanostructures such as nanotubes and nanowires can offer new capabilities to microfabrication, in particular by taking advantage of the collective self-organization of nanostructures, and local control of their growth behavior with respect to microfabricated patterns. Our goal is to introduce vertically aligned carbon nanotubes (CNTs), which we refer to as CNT "forests", as a new microfabrication material. We present details of a suite of related methods recently developed by our group: fabrication of CNT forest microstructures by thermal CVD from lithographically patterned catalyst thin films; self-directed elastocapillary densification of CNT microstructures; and replica molding of polymer microstructures using CNT composite master molds. In particular, our work shows that self-directed capillary densification ("capillary forming"), which is performed by condensation of a solvent onto the substrate with CNT microstructures, significantly increases the packing density of CNTs. This process enables directed transformation of vertical CNT microstructures into straight, inclined, and twisted shapes, which have robust mechanical properties exceeding those of typical microfabrication polymers. This in turn enables formation of nanocomposite CNT master molds by capillary-driven infiltration of polymers. The replica structures exhibit the anisotropic nanoscale texture of the aligned CNTs, and can have walls with sub-micron thickness and aspect ratios exceeding 50:1. Integration of CNT microstructures in fabrication offers further opportunity to exploit the electrical and thermal properties of CNTs, and diverse capabilities for chemical and biochemical functionalization (3).
NASA Astrophysics Data System (ADS)
Okada, Kazuhiro; Takagi, Tomohiro; Kobayashi, Masahiro; Ohnuma, Haruka; Noji, Takashi; Koike, Yoji; Ayukawa, Shin-ya; Kitano, Haruhisa
2018-04-01
The application of an electrochemical method to the iron-based chalcogenide superconductors has great potentials in enhancing their properties such as the superconducting transition temperature. Unfortunately, this method has been limited to polycrystalline powders or thin film samples with a large surface area. Here, we demonstrate that the electrochemical method can be usefully applied to single-crystal devices of FeSe1- x Te x superconductors by combining it with the focused ion beam (FIB) microfabrication techniques. Our results open a new route to developing the high-quality superconducting devices fabricated using layered iron-based chalcogenides, whose properties are electrochemically controlled.
“Playing around” with Field-Effect Sensors on the Basis of EIS Structures, LAPS and ISFETs
Schöning, Michael J.
2005-01-01
Microfabricated semiconductor devices are becoming increasingly relevant, also for the detection of biological and chemical quantities. Especially, the “marriage” of biomolecules and silicon technology often yields successful new sensor concepts. The fabrication techniques of such silicon-based chemical sensors and biosensors, respectively, will have a distinct impact in different fields of application such as medicine, food technology, environment, chemistry and biotechnology as well as information processing. Moreover, scientists and engineers are interested in the analytical benefits of miniaturised and microfabricated sensor devices. This paper gives a survey on different types of semiconductor-based field-effect structures that have been recently developed in our laboratory.
R&D 100, 2016: T-Quake – Quantum-Mechanical Transmitter/Receiver Microchip
DOE Office of Scientific and Technical Information (OSTI.GOV)
Tauke-Pedretti, Anna; Camacho, Ryan; Thayer, Gayle
2016-11-07
Applying advanced microfabrication techniques and innovative microdesign, the Sandia Enabled Communications and Authentication Network (SECANT) team has designed and produced photonic microchips capable of sending, receiving, and processing quantum signals for applications in cyber and physical security.
Balakrishnan, Sreenath; Suma, M.S.; Raju, Shilpa R.; Bhargav, Santosh D.B.; Arunima, S.; Das, Saumitra
2015-01-01
Abstract We present a perfusion culture system with miniature bioreactors and peristaltic pumps. The bioreactors are designed for perfusion, live-cell imaging studies, easy incorporation of microfabricated scaffolds, and convenience of operation in standard cell culture techniques. By combining with miniature peristaltic pumps—one for each bioreactor to avoid cross-contamination and to maintain desired flow rate in each—we have made a culture system that facilitates perfusion culture inside standard incubators. This scalable system can support multiple parallel perfusion experiments. The major components are fabricated by three-dimensional printing using VeroWhite, which we show to be amenable to ex vivo cell culture. Furthermore, the components of the system can be reused, thus making it economical. We validate the system and illustrate its versatility by culturing primary rat hepatocytes, live imaging the growth of mouse fibroblasts (NIH 3T3) on microfabricated ring-scaffolds inserted into the bioreactor, performing perfusion culture of breast cancer cells (MCF7), and high-magnification imaging of hepatocarcinoma cells (HuH7). PMID:26309810
Microfabricated Electrochemical Cell-Based Biosensors for Analysis of Living Cells In Vitro
Wang, Jun; Wu, Chengxiong; Hu, Ning; Zhou, Jie; Du, Liping; Wang, Ping
2012-01-01
Cellular biochemical parameters can be used to reveal the physiological and functional information of various cells. Due to demonstrated high accuracy and non-invasiveness, electrochemical detection methods have been used for cell-based investigation. When combined with improved biosensor design and advanced measurement systems, the on-line biochemical analysis of living cells in vitro has been applied for biological mechanism study, drug screening and even environmental monitoring. In recent decades, new types of miniaturized electrochemical biosensor are emerging with the development of microfabrication technology. This review aims to give an overview of the microfabricated electrochemical cell-based biosensors, such as microelectrode arrays (MEA), the electric cell-substrate impedance sensing (ECIS) technique, and the light addressable potentiometric sensor (LAPS). The details in their working principles, measurement systems, and applications in cell monitoring are covered. Driven by the need for high throughput and multi-parameter detection proposed by biomedicine, the development trends of electrochemical cell-based biosensors are also introduced, including newly developed integrated biosensors, and the application of nanotechnology and microfluidic technology. PMID:25585708
Microfabricated teeter-totter resonator
Adkins, Douglas Ray; Heller, Edwin J.; Shul, Randy J.
2004-11-23
A microfabricated teeter-totter resonator comprises a frame, a paddle pivotably anchored to the frame by pivot arms that define an axis of rotation, a current conductor line on a surface of the paddle, means for applying a static magnetic field substantially perpendicular to the rotational axis and in the plane of the paddle, and means for energizing the current conductor line with an alternating current. A Lorentz force is generated by the interaction of the magnetic field with the current flowing in the conductor line, causing the paddle to oscillate about the axis of rotation. The teeter-totter resonator can be fabricated with micromachining techniques with materials used in the integrated circuits manufacturing industry. The microfabricated teeter-totter resonator has many varied applications, both as an actuation device and as a sensor. When used as a chemical sensor, a chemically sensitive coating can be disposed on one or both surfaces of the paddle to enhance the absorption of chemical analytes from a fluid stream. The resulting mass change can be detected as a change in the resonant frequency or phase of the oscillatory motion of the paddle.
R&D 100, 2016: T-Quake â Quantum-Mechanical Transmitter/Receiver Microchip
Tauke-Pedretti, Anna; Camacho, Ryan; Thayer, Gayle
2018-06-13
Applying advanced microfabrication techniques and innovative microdesign, the Sandia Enabled Communications and Authentication Network (SECANT) team has designed and produced photonic microchips capable of sending, receiving, and processing quantum signals for applications in cyber and physical security.
Microfabricated packed gas chromatographic column
Kottenstette, Richard; Matzke, Carolyn M.; Frye-Mason, Gregory C.
2003-12-16
A new class of miniaturized gas chromatographic columns has been invented. These chromatographic columns are formed using conventional micromachining techniques, and allow packed columns having lengths on the order of a meter to be fabricated with a footprint on the order of a square centimeter.
Microfabrication for Drug Delivery
Koch, Brendan; Rubino, Ilaria; Quan, Fu-Shi; Yoo, Bongyoung; Choi, Hyo-Jick
2016-01-01
This review is devoted to discussing the application of microfabrication technologies to target challenges encountered in life processes by the development of drug delivery systems. Recently, microfabrication has been largely applied to solve health and pharmaceutical science issues. In particular, fabrication methods along with compatible materials have been successfully designed to produce multifunctional, highly effective drug delivery systems. Microfabrication offers unique tools that can tackle problems in this field, such as ease of mass production with high quality control and low cost, complexity of architecture design and a broad range of materials. Presented is an overview of silicon- and polymer-based fabrication methods that are key in the production of microfabricated drug delivery systems. Moreover, the efforts focused on studying the biocompatibility of materials used in microfabrication are analyzed. Finally, this review discusses representative ways microfabrication has been employed to develop systems delivering drugs through the transdermal and oral route, and to improve drug eluting implants. Additionally, microfabricated vaccine delivery systems are presented due to the great impact they can have in obtaining a cold chain-free vaccine, with long-term stability. Microfabrication will continue to offer new, alternative solutions for the development of smart, advanced drug delivery systems. PMID:28773770
Monolithic Carbide-Derived Carbon Films for Micro-Supercapacitors
NASA Astrophysics Data System (ADS)
Chmiola, John; Largeot, Celine; Taberna, Pierre-Louis; Simon, Patrice; Gogotsi, Yury
2010-04-01
Microbatteries with dimensions of tens to hundreds of micrometers that are produced by common microfabrication techniques are poised to provide integration of power sources onto electronic devices, but they still suffer from poor cycle lifetime, as well as power and temperature range of operation issues that are alleviated with the use of supercapacitors. There have been a few reports on thin-film and other micro-supercapacitors, but they are either too thin to provide sufficient energy or the technology is not scalable. By etching supercapacitor electrodes into conductive titanium carbide substrates, we demonstrate that monolithic carbon films lead to a volumetric capacity exceeding that of micro- and macroscale supercapacitors reported thus far, by a factor of 2. This study also provides the framework for integration of high-performance micro-supercapacitors onto a variety of devices.
Monolithic carbide-derived carbon films for micro-supercapacitors.
Chmiola, John; Largeot, Celine; Taberna, Pierre-Louis; Simon, Patrice; Gogotsi, Yury
2010-04-23
Microbatteries with dimensions of tens to hundreds of micrometers that are produced by common microfabrication techniques are poised to provide integration of power sources onto electronic devices, but they still suffer from poor cycle lifetime, as well as power and temperature range of operation issues that are alleviated with the use of supercapacitors. There have been a few reports on thin-film and other micro-supercapacitors, but they are either too thin to provide sufficient energy or the technology is not scalable. By etching supercapacitor electrodes into conductive titanium carbide substrates, we demonstrate that monolithic carbon films lead to a volumetric capacity exceeding that of micro- and macroscale supercapacitors reported thus far, by a factor of 2. This study also provides the framework for integration of high-performance micro-supercapacitors onto a variety of devices.
Development of polypyrrole based solid-state on-chip microactuators using photolithography
NASA Astrophysics Data System (ADS)
Zhong, Yong; Lundemo, Staffan; Jager, Edwin W. H.
2018-07-01
There is a need for soft microactuators, especially for biomedical applications. We have developed a microfabrication process to create such soft, on-chip polymer based microactuators that can operate in air. The on-chip microactuators were fabricated using standard photolithographic techniques and wet etching, combined with special designed process to micropattern the electroactive polymer polypyrrole that drives the microactuators. By immobilizing a UV-patternable gel containing a liquid electrolyte on top of the electroactive polypyrrole layer, actuation in air was achieved although with reduced movement. Further optimization of the processing is currently on-going. The result shows the possibility to batch fabricate complex microsystems such as microrobotics and micromanipulators based on these solid-state on-chip microactuators using microfabrication methods including standard photolithographic processes.
Diffusive Silicon Nanopore Membranes for Hemodialysis Applications
Kim, Steven; Feinberg, Benjamin; Kant, Rishi; Chui, Benjamin; Goldman, Ken; Park, Jaehyun; Moses, Willieford; Blaha, Charles; Iqbal, Zohora; Chow, Clarence; Wright, Nathan; Fissell, William H.; Zydney, Andrew; Roy, Shuvo
2016-01-01
Hemodialysis using hollow-fiber membranes provides life-sustaining treatment for nearly 2 million patients worldwide with end stage renal disease (ESRD). However, patients on hemodialysis have worse long-term outcomes compared to kidney transplant or other chronic illnesses. Additionally, the underlying membrane technology of polymer hollow-fiber membranes has not fundamentally changed in over four decades. Therefore, we have proposed a fundamentally different approach using microelectromechanical systems (MEMS) fabrication techniques to create thin-flat sheets of silicon-based membranes for implantable or portable hemodialysis applications. The silicon nanopore membranes (SNM) have biomimetic slit-pore geometry and uniform pores size distribution that allow for exceptional permeability and selectivity. A quantitative diffusion model identified structural limits to diffusive solute transport and motivated a new microfabrication technique to create SNM with enhanced diffusive transport. We performed in vitro testing and extracorporeal testing in pigs on prototype membranes with an effective surface area of 2.52 cm2 and 2.02 cm2, respectively. The diffusive clearance was a two-fold improvement in with the new microfabrication technique and was consistent with our mathematical model. These results establish the feasibility of using SNM for hemodialysis applications with additional scale-up. PMID:27438878
We present the design and fabrication of a micro electro mechanical systems (MEMS) air-microfluidic particulate matter (PM) sensor, and show experimental results obtained from exposing the sensor to concentrations of tobacco smoke and diesel exhaust, two commonly occurring P...
A facile and low-cost micro fabrication material: flash foam.
He, Yong; Xiao, Xiao; Wu, Yan; Fu, Jian-zhong
2015-08-28
Although many microfabrication methods have been reported, the preliminary replication templates used in most microfabrication still depend on the expensive and long-period photolithography. This paper explores an alternative replication templates based on a daily used material, flash foam (FF), and proposes a facile microfabrication method, flash foam stamp lithography (FFSL). When FF is exposed with a desired pattern mask, the negative of the pattern is transferred to its surface and micro structures are formed due to the shrinkage of the exposed area. As FF is commonly used in personal stamps, FFSL is very simple and cost-effective. In this paper, we demonstrated that FF is a good and low-cost template for many micro fabrication methods, such as micro casting and soft lithography. Thus, designing and fabricating micro structures at personal office immediately become possible with FFSL. Furthermore, we demonstrated that multi-scale micro structures can be easily fabricated by double exposure with FFSL. Skin textures is used as another case to demonstrate that FFSL can fabricate structures with different depth in a single exposure. As a result, FF shows a promising future in biology, and analytical chemistry, such as rapid fabrication of point of care diagnostics and microfluidic analytical devices with low cost.
A Microfabricated Scaffold for Retinal Progenitor Cell Grafting
Neeley, William L.; Redenti, Stephen; Klassen, Henry; Tao, Sarah; Desai, Tejal; Young, Michael J.; Langer, Robert
2007-01-01
Diseases that cause photoreceptor cell degeneration afflict millions of people, yet no restorative treatment exists for these blinding disorders. Replacement of photoreceptors using retinal progenitor cells (RPCs) represents a promising therapy for the treatment of retinal degeneration. Previous studies have demonstrated the ability of polymer scaffolds to increase significantly both the survival and differentiation of RPCs. We report the microfabrication of a poly(glycerol-sebacate) scaffold with superior mechanical properties for the delivery of RPCs to the subretinal space. Using a replica molding technique, a porous poly(glycerol-sebacate) scaffold with a thickness of 45 μm was fabricated. Evaluation of the mechanical properties of this scaffold showed that the Young’s modulus is about 5-fold lower and the maximum elongation at failure is about 10-fold higher than the previously reported RPC scaffolds. RPCs strongly adhered to the poly(glycerol-sebacate) scaffold, and endogenous fluorescence nearly doubled over a 2 day period before leveling off after 3 days. Immunohistochemistry revealed that cells grown on the scaffold for 7 days expressed a mixture of immature and mature markers, suggesting a tendency towards differentiation. We conclude that microfabricated poly(glycerol-sebacate) exhibits a number of novel properties for use as a scaffold for RPC delivery. PMID:17961646
Implantable Bladder Sensors: A Methodological Review
Dakurah, Mathias Naangmenkpeong; Koo, Chiwan; Choi, Wonseok; Joung, Yeun-Ho
2015-01-01
The loss of urinary bladder control/sensation, also known as urinary incontinence (UI), is a common clinical problem in autistic children, diabetics, and the elderly. UI not only causes discomfort for patients but may also lead to kidney failure, infections, and even death. The increase of bladder urine volume/pressure above normal ranges without sensation of UI patients necessitates the need for bladder sensors. Currently, a catheter-based sensor is introduced directly through the urethra into the bladder to measure pressure variations. Unfortunately, this method is inaccurate because measurement is affected by disturbances in catheter lines as well as delays in response time owing to the inertia of urine inside the bladder. Moreover, this technique can cause infection during prolonged use; hence, it is only suitable for short-term measurement. Development of discrete wireless implantable sensors to measure bladder volume/pressure would allow for long-term monitoring within the bladder, while maintaining the patient’s quality of life. With the recent advances in microfabrication, the size of implantable bladder sensors has been significantly reduced. However, microfabricated sensors face hostility from the bladder environment and require surgical intervention for implantation inside the bladder. Here, we explore the various types of implantable bladder sensors and current efforts to solve issues like hermeticity, biocompatibility, drift, telemetry, power, and compatibility issues with popular imaging tools such as computed tomography and magnetic resonance imaging. We also discuss some possible improvements/emerging trends in the design of an implantable bladder sensor. PMID:26620894
Microfluidic perfusion culture.
Hattori, Koji; Sugiura, Shinji; Kanamori, Toshiyuki
2014-01-01
Microfluidic perfusion culture is a novel technique to culture animal cells in a small-scale microchamber with medium perfusion. Polydimethylsiloxane (PDMS) is the most popular material to fabricate a microfluidic perfusion culture chip. Photolithography and replica molding techniques are generally used for fabrication of a microfluidic perfusion culture chip. Pressure-driven perfusion culture system is convenient technique to carry out the perfusion culture of animal cells in a microfluidic device. Here, we describe a general theory on microfluid network design, microfabrication technique, and experimental technique for pressure-driven perfusion culture in an 8 × 8 microchamber array on a glass slide-sized microchip made out of PDMS.
Fabrication of fillable microparticles and other complex 3D microstructures
NASA Astrophysics Data System (ADS)
McHugh, Kevin J.; Nguyen, Thanh D.; Linehan, Allison R.; Yang, David; Behrens, Adam M.; Rose, Sviatlana; Tochka, Zachary L.; Tzeng, Stephany Y.; Norman, James J.; Anselmo, Aaron C.; Xu, Xian; Tomasic, Stephanie; Taylor, Matthew A.; Lu, Jennifer; Guarecuco, Rohiverth; Langer, Robert; Jaklenec, Ana
2017-09-01
Three-dimensional (3D) microstructures created by microfabrication and additive manufacturing have demonstrated value across a number of fields, ranging from biomedicine to microelectronics. However, the techniques used to create these devices each have their own characteristic set of advantages and limitations with regards to resolution, material compatibility, and geometrical constraints that determine the types of microstructures that can be formed. We describe a microfabrication method, termed StampEd Assembly of polymer Layers (SEAL), and create injectable pulsatile drug-delivery microparticles, pH sensors, and 3D microfluidic devices that we could not produce using traditional 3D printing. SEAL allows us to generate microstructures with complex geometry at high resolution, produce fully enclosed internal cavities containing a solid or liquid, and use potentially any thermoplastic material without processing additives.
Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication
NASA Astrophysics Data System (ADS)
Lopez, M. J.; Caballero, D.; Campo, E. M.; Perez-Castillejos, R.; Errachid, A.; Esteve, J.; Plaza, J. A.
2008-07-01
Novel medical and biological applications are driving increased interest in the fabrication of micropipette or micro-dispensers. Reduced volume samples and drug dosages are prime motivators in this effort. We have combined microfabrication technology with ion beam milling techniques to successfully produce cantilever-type polysilicon micro-dispensers with 3D enclosed microchannels. The microfabrication technology described here allows for the designing of nozzles with multiple shapes. The contribution of ion beam milling has had a large impact on the fabrication process and on further customizing shapes of nozzles and inlet ports. Functionalization tests were conducted to prove the viability of ion beam-fabricated micro-dispensers. Self-assembled monolayers were successfully formed when a gold surface was patterned with a thiol solution dispensed by the fabricated micro-dispensers.
NASA Astrophysics Data System (ADS)
McAllister, Devin V.; Wang, Ping M.; Davis, Shawn P.; Park, Jung-Hwan; Canatella, Paul J.; Allen, Mark G.; Prausnitz, Mark R.
2003-11-01
Arrays of micrometer-scale needles could be used to deliver drugs, proteins, and particles across skin in a minimally invasive manner. We therefore developed microfabrication techniques for silicon, metal, and biodegradable polymer microneedle arrays having solid and hollow bores with tapered and beveled tips and feature sizes from 1 to 1,000 μm. When solid microneedles were used, skin permeability was increased in vitro by orders of magnitude for macromolecules and particles up to 50 nm in radius. Intracellular delivery of molecules into viable cells was also achieved with high efficiency. Hollow microneedles permitted flow of microliter quantities into skin in vivo, including microinjection of insulin to reduce blood glucose levels in diabetic rats. transdermal drug delivery | skin | microelectromechanical systems | solid microneedle | hollow needle injection
NASA Astrophysics Data System (ADS)
Zhou, Ming; Liu, Li-Peng; Dai, Qi-Xun; Pan, Chuan-Peng
2005-01-01
Two-photon absorption (TPA) is confined at the focus under tight-focusing conditions, which provides a novel concept for micro-fabrication using two-photon photo-polymerization in resin. The development of three-dimensional micro-fabrication by femtosecond laser was introduced at first, then the merits of femtosecond two-photon photo-polymerization was expatiated. Femtosecond laser direct scanning three-dimensional (3D) micro-fabrication system was set up and corresponding controlling software was developed. We demonstrated a fabrication of three-dimensional microstructures using photo-polymerization of resin by two-photon absorption. The precision of micro-machining and the spatial resolution reached 1um because of TPA. The dependence of fabricated line width to the micro-fabrication speed was investigated. Benzene ring, CHINA and layer-by-layer of log structures were fabricated in this 3D- micro-fabrication system as examples.
Temperature programmable microfabricated gas chromatography column
Manginell, Ronald P.; Frye-Mason, Gregory C.
2003-12-23
A temperature programmable microfabricated gas chromatography column enables more efficient chemical separation of chemical analytes in a gas mixture by the integration of a resistive heating element and temperature sensing on the microfabricated column. Additionally, means are provided to thermally isolate the heated column from their surroundings. The small heat capacity and thermal isolation of the microfabricated column improves the thermal time response and power consumption, both important factors for portable microanalytical systems.
Single neuronal recordings using surface micromachined polysilicon microelectrodes.
Muthuswamy, Jit; Okandan, Murat; Jackson, Nathan
2005-03-15
Bulk micromachining techniques of silicon have been used successfully in the past several years to microfabricate microelectrodes for monitoring single neurons in acute and chronic experiments. In this study we report for the first time a novel surface micromachining technique to microfabricate a very thin polysilicon microelectrode that can be used for monitoring single-unit activity in the central nervous system. The microelectrodes are 3 mm long and 50 microm x 3.75 microm in cross-section. Excellent signal to noise ratios in the order of 25-35 dB were obtained while recording neuronal action potentials. The microelectrodes successfully penetrated the brains after a microincision of the dura mater. Chronic implantation of the microprobe for up to 33 days produced only minor gliosis. Since the polysilicon shank acts as a conductor, additional processing steps involved in laying conductor lines on silicon substrates are avoided. Further, surface micromachining allows for fabricating extremely thin microelectrodes which could result in decreased inflammatory responses. We conclude that the polysilicon microelectrode reported here could be a complementary approach to bulk-micromachined silicon microelectrodes for chronic monitoring of single neurons in the central nervous system.
Additive direct-write microfabrication for MEMS: A review
NASA Astrophysics Data System (ADS)
Teh, Kwok Siong
2017-12-01
Direct-write additive manufacturing refers to a rich and growing repertoire of well-established fabrication techniques that builds solid objects directly from computer- generated solid models without elaborate intermediate fabrication steps. At the macroscale, direct-write techniques such as stereolithography, selective laser sintering, fused deposition modeling ink-jet printing, and laminated object manufacturing have significantly reduced concept-to-product lead time, enabled complex geometries, and importantly, has led to the renaissance in fabrication known as the maker movement. The technological premises of all direct-write additive manufacturing are identical—converting computer generated three-dimensional models into layers of two-dimensional planes or slices, which are then reconstructed sequentially into threedimensional solid objects in a layer-by-layer format. The key differences between the various additive manufacturing techniques are the means of creating the finished layers and the ancillary processes that accompany them. While still at its infancy, direct-write additive manufacturing techniques at the microscale have the potential to significantly lower the barrier-of-entry—in terms of cost, time and training—for the prototyping and fabrication of MEMS parts that have larger dimensions, high aspect ratios, and complex shapes. In recent years, significant advancements in materials chemistry, laser technology, heat and fluid modeling, and control systems have enabled additive manufacturing to achieve higher resolutions at the micrometer and nanometer length scales to be a viable technology for MEMS fabrication. Compared to traditional MEMS processes that rely heavily on expensive equipment and time-consuming steps, direct-write additive manufacturing techniques allow for rapid design-to-prototype realization by limiting or circumventing the need for cleanrooms, photolithography and extensive training. With current direct-write additive manufacturing technologies, it is possible to fabricate unsophisticated micrometer scale structures at adequate resolutions and precisions using materials that range from polymers, metals, ceramics, to composites. In both academia and industry, direct-write additive manufacturing offers extraordinary promises to revolutionize research and development in microfabrication and MEMS technologies. Importantly, direct-write additive manufacturing could appreciably augment current MEMS fabrication technologies, enable faster design-to-product cycle, empower new paradigms in MEMS designs, and critically, encourage wider participation in MEMS research at institutions or for individuals with limited or no access to cleanroom facilities. This article aims to provide a limited review of the current landscape of direct-write additive manufacturing techniques that are potentially applicable for MEMS microfabrication.
Techniques For Mass Production Of Tunneling Electrodes
NASA Technical Reports Server (NTRS)
Kenny, Thomas W.; Podosek, Judith A.; Reynolds, Joseph K.; Rockstad, Howard K.; Vote, Erika C.; Kaiser, William J.
1993-01-01
Techniques for mass production of tunneling electrodes developed from silicon-micromachining, lithographic patterning, and related microfabrication processes. Tunneling electrodes named because electrons travel between them by quantum-mechanical tunneling; tunneling electrodes integral parts of tunneling transducer/sensors, which act in conjunction with feedback circuitry to stabilize tunneling currents by maintaining electrode separations of order of 10 Angstrom. Essential parts of scanning tunneling microscopes and related instruments, and used as force and position transducers in novel microscopic accelerometers and infrared detectors.
2013-03-01
beam tunnel [5,6] for a high - power , wideband W- band traveling-wave tube (TWT) amplifier. UV-LIGA is also a promising technique at higher...wide- band , high - power operation of the amplifier [7, 8]. The interaction circuit consists of two traveling-wave stages separated by a power ...technique produces monolithic all-copper circuits, integrated with electron beam tunnel, suitable for high - power continuous-wave operation [1]. We
NASA Technical Reports Server (NTRS)
Yang, Ren; Feeback, Daniel L.; Wang, Wanjun
2004-01-01
This paper details a novel three-dimensional (3D) hydro-focusing micro cell sorter for micro flow cytometry applications. The unit was microfabricated by means of SU-8 3D lithography. The 3D microstructure for coaxial sheathing was designed, microfabricated, and tested. Three-dimensional hydro-focusing capability was demonstrated with an experiment to sort labeled tanned sheep erythrocytes (red blood cells). This polymer hydro-focusing microstructure is easily microfabricated and integrated with other polymer microfluidic structures.
NASA Technical Reports Server (NTRS)
Yang, Ren; Feedback, Daniel L.; Wang, Wanjun
2004-01-01
This paper details a novel three-dimensional (3D) hydro-focusing micro cell sorter for micro flow cytometry applications. The unit was micro-fabricated by means of SU-8 3D lithography. The 3D microstructure for coaxial sheathing was designed, micro-fabricated, and tested. Three-dimensional hydrofocusing capability was demonstrated with an experiment to sort labeled tanned sheep erythrocytes (red blood cells). This polymer hydro-focusing microstructure is easily micro-fabricated and integrated with other polymer microfluidic structures.
Laser microfabrication of biomedical devices: time-resolved microscopy of the printing process
NASA Astrophysics Data System (ADS)
Serra, P.; Patrascioiu, A.; Fernández-Pradas, J. M.; Morenza, J. L.
2013-04-01
Laser printing constitutes an interesting alternative to more conventional printing techniques in the microfabrication of biomedical devices. The principle of operation of most laser printing techniques relies on the highly localized absorption of strongly focused laser pulses in the close proximity of the free surface of the liquid to be printed. This leads to the generation of a cavitation bubble which further expansion results in the ejection of a small fraction of the liquid, giving place to the deposition of a well-defined droplet onto a collector substrate. Laser printing has proved feasible for printing biological materials, from single-stranded DNA to proteins, and even living cells and microorganisms, with high degrees of resolution and reproducibility. In consequence, laser printing appears to be an excellent candidate for the fabrication of biological microdevices, such as DNA and protein microarrays, or miniaturized biosensors. The optimization of the performances of laser printing techniques requires a detailed knowledge of the dynamics of liquid transfer. Time-resolved microscopy techniques play a crucial role in this concern, since they allow tracking the evolution of the ejected material with excellent time and spatial resolution. Investigations carried out up to date have shown that liquid ejection proceeds through the formation of long, thin and stable liquid jets. In this work the different approaches used so far for monitoring liquid ejection during laser printing are considered, and it is shown how these techniques make possible to understand the complex dynamics involved in the process.
A facile and low-cost micro fabrication material: flash foam
He, Yong; Xiao, Xiao; Wu, Yan; Fu, Jian-zhong
2015-01-01
Although many microfabrication methods have been reported, the preliminary replication templates used in most microfabrication still depend on the expensive and long-period photolithography. This paper explores an alternative replication templates based on a daily used material, flash foam (FF), and proposes a facile microfabrication method, flash foam stamp lithography (FFSL). When FF is exposed with a desired pattern mask, the negative of the pattern is transferred to its surface and micro structures are formed due to the shrinkage of the exposed area. As FF is commonly used in personal stamps, FFSL is very simple and cost-effective. In this paper, we demonstrated that FF is a good and low-cost template for many micro fabrication methods, such as micro casting and soft lithography. Thus, designing and fabricating micro structures at personal office immediately become possible with FFSL. Furthermore, we demonstrated that multi-scale micro structures can be easily fabricated by double exposure with FFSL. Skin textures is used as another case to demonstrate that FFSL can fabricate structures with different depth in a single exposure. As a result, FF shows a promising future in biology, and analytical chemistry, such as rapid fabrication of point of care diagnostics and microfluidic analytical devices with low cost. PMID:26314247
Bransky, Avishay; Korin, Natanel; Nemirovski, Yael; Dinnar, Uri
2006-08-15
An automated rheoscope has been developed, utilizing a microfabricated glass flow cell, high speed camera and advanced image-processing software. RBCs suspended in a high viscosity medium were filmed flowing through a microchannel. Under these conditions, RBCs exhibit different orientations and deformations according to their location in the velocity profile. The rheoscope system produces valuable data such as velocity profile of RBCs, spatial distribution within a microchannel and deformation index (DI) curves. The variation of DI across the channel height, due to change in shear stress, was measured carrying implications for diffractometry methods. These curves of DI were taken at a constant flow rate and cover most of the relevant shear stress spectrum. This is an improvement of the existing techniques for deformability measurements and may serve as a diagnostic tool for certain blood disorders. The DI curves were compared to measurements of the flowing RBCs velocity profile. In addition, we found that RBCs flowing in a microchannel are mostly gathered in the center of the flow and maintain a characteristic spatial distribution. The spatial distribution in this region changes slightly with increasing flow rate. Hence, the system described, provides means for examining the behavior of individual RBCs, and may serve as a microfabricated diagnostic device for deformability measurement.
Microfabrication of a High-Throughput Nanochannel Delivery/Filtration System
NASA Technical Reports Server (NTRS)
Ferrari, Mauro; Liu, Xuewu; Grattoni, Alessandro; Fine, Daniel; Hosali, Sharath; Goodall, Randi; Medema, Ryan; Hudson, Lee
2011-01-01
A microfabrication process is proposed to produce a nanopore membrane for continuous passive drug release to maintain constant drug concentrations in the patient s blood throughout the delivery period. Based on silicon microfabrication technology, the dimensions of the nanochannel area, as well as microchannel area, can be precisely controlled, thus providing a steady, constant drug release rate within an extended time period. The multilayered nanochannel structures extend the limit of release rate range of a single-layer nanochannel system, and allow a wide range of pre-defined porosity to achieve any arbitrary drug release rate using any preferred nanochannel size. This membrane system could also be applied to molecular filtration or isolation. In this case, the nanochannel length can be reduced to the nanofabrication limit, i.e., 10s of nm. The nanochannel delivery system membrane is composed of a sandwich of a thin top layer, the horizontal nanochannels, and a thicker bottom wafer. The thin top layer houses an array of microchannels that offers the inlet port for diffusing molecules. It also works as a lid for the nanochannels by providing the channels a top surface. The nanochannels are fabricated by a sacrificial layer technique that obtains smooth surfaces and precisely controlled dimensions. The structure of this nanopore membrane is optimized to yield high mechanical strength and high throughput.
Sub-to super-ambient temperature programmable microfabricated gas chromatography column
Robinson, Alex L.; Anderson, Lawrence F.
2004-03-16
A sub- to super-ambient temperature programmable microfabricated gas chromatography column enables more efficient chemical separation of chemical analytes in a gas mixture by combining a thermoelectric cooler and temperature sensing on the microfabricated column. Sub-ambient temperature programming enables the efficient separation of volatile organic compounds and super-ambient temperature programming enables the elution of less volatile analytes within a reasonable time. The small heat capacity and thermal isolation of the microfabricated column improves the thermal time response and power consumption, both important factors for portable microanalytical systems.
NASA Technical Reports Server (NTRS)
Yang, Ren; Feeback, Daniel L.; Wang, Wan-Jun
2005-01-01
This paper details a novel three-dimensional (3D) hydro-focusing micro cell sorter for micro flow cytometry applications. The unit was microfabricated by means of SU-8 3D lithography. The 3D microstructure for coaxial sheathing was designed, microfabricated, and tested. Three-dimensional hydrofocusing capability was demonstrated with an experiment to sort labeled tanned sheep erythrocytes (red blood cells). This polymer hydro-focusing microstructure is easily microfabricated and integrated with other polymer microfluidic structures. Keywords: SU-8, three-dimensional hydro-focusing, microfluidic, microchannel, cytometer
A Program of Research on Microfabrication Techniques for VLSI Magnetic Devices.
1982-11-30
epitaxial ( LPE ) garnet films have been investigated by transmission electron microscopy B. A special technique involving physical polishing and ion milling...was used for producing ultra-thin cross-sections of the LPE garnet films . To our knowledge no one else has such capabilities. It was found that the...Materials and the Effects of Ion Implantation on them 3 2.1 The Effects of Deuterium and Oxygen Implantation on the Magnetic 3 Parameters of Garnet Films 2.2
Development of Optimized Combustors and Thermoelectric Generators for Palm Power Generation
2004-10-26
manufacturing techniques and microfabrication, on the chemical kinetics of JP-8 surrogates and on the development of advanced laser diagnostics for JP-8...takes the shape of a cone from the tip of which a thin liquid thread emerges, in the so-called cone-jet mode [1]. This microjet breaks into a stream of...combustion systems. 2. The development of a diagnostic technique based on two-color laser induced fluorescence from fluorescence tags added to the fuel
Shrink-film microfluidic education modules: Complete devices within minutes
Nguyen, Diep; McLane, Jolie; Lew, Valerie; Pegan, Jonathan; Khine, Michelle
2011-01-01
As advances in microfluidics continue to make contributions to diagnostics and life sciences, broader awareness of this expanding field becomes necessary. By leveraging low-cost microfabrication techniques that require no capital equipment or infrastructure, simple, accessible, and effective educational modules can be made available for a broad range of educational needs from middle school demonstrations to college laboratory classes. These modules demonstrate key microfluidic concepts such as diffusion and separation as well as “laboratory on-chip” applications including chemical reactions and biological assays. These modules are intended to provide an interdisciplinary hands-on experience, including chip design, fabrication of functional devices, and experiments at the microscale. Consequently, students will be able to conceptualize physics at small scales, gain experience in computer-aided design and microfabrication, and perform experiments—all in the context of addressing real-world challenges by making their own lab-on-chip devices. PMID:21799715
Shrink-film microfluidic education modules: Complete devices within minutes.
Nguyen, Diep; McLane, Jolie; Lew, Valerie; Pegan, Jonathan; Khine, Michelle
2011-06-01
As advances in microfluidics continue to make contributions to diagnostics and life sciences, broader awareness of this expanding field becomes necessary. By leveraging low-cost microfabrication techniques that require no capital equipment or infrastructure, simple, accessible, and effective educational modules can be made available for a broad range of educational needs from middle school demonstrations to college laboratory classes. These modules demonstrate key microfluidic concepts such as diffusion and separation as well as "laboratory on-chip" applications including chemical reactions and biological assays. These modules are intended to provide an interdisciplinary hands-on experience, including chip design, fabrication of functional devices, and experiments at the microscale. Consequently, students will be able to conceptualize physics at small scales, gain experience in computer-aided design and microfabrication, and perform experiments-all in the context of addressing real-world challenges by making their own lab-on-chip devices.
A review of micro-powder injection moulding as a microfabrication technique
NASA Astrophysics Data System (ADS)
Attia, Usama M.; Alcock, Jeffrey R.
2011-04-01
Micro-powder injection moulding (µPIM) is a fast-developing micro-manufacturing technique for the production of metal and ceramic components. Shape complexity, dimensional accuracy, replication fidelity, material variety combined with high-volume capabilities are some of the key advantages of the technology. This review assesses the capabilities and limitations of µPIM as a micro-manufacturing technique by reviewing the latest developments in the area and by considering potential improvements. The basic elements of the process chain, variant processes and simulation attempts are discussed and evaluated. Challenges and research gaps are highlighted, and potential areas for improvement are presented.
Drosophila as an unconventional substrate for microfabrication
NASA Astrophysics Data System (ADS)
Shum, Angela J.; Parviz, Babak A.
2007-02-01
We present the application of Drosophila fruit flies as an unconventional substrate for microfabrication. Drosophila by itself represents a complex system capable of many functions not attainable with current microfabrication technology. By using Drosophila as a substrate, we are able to capitalize on these natural functions while incorporating additional functionality into a superior hybrid system. In the following, development of microfabrication processes for Drosophila substrates is discussed. In particular, results of a study on Drosophila tolerance to vacuum pressure during multiple stages of development are given. A remarkable finding that adult Drosophila may withstand up to 3 hours of exposure to vacuum with measurable survival is noted. This finding opens a number of new opportunities for performing fabrication processes, similar to the ones performed on a silicon wafer, on a fruit fly as a live substrate. As a model microfabrication process, it is shown how a collection of Drosophila can be made to self-assemble into an array of microfabricated recesses on a silicon wafer and how a shadow mask can be used to thermally evaporate 100 nm of indium on flies. The procedure resulted in the production of a number of live flies with a pre-designed metal micropattern on their wings. This demonstration of vacuum microfabrication on a live organism provides the first step towards the development of a hybrid biological/solid-state manufacturing process for complex microsystems.
Current Trends in Ubiquitous Biosensing
2013-08-01
fundamental advances have been made in the synergistic combination of research in the fields of microfluidics and optics, coined “optofluidics” [24-26...microfabrication and clean-room techniques for the development of microfluidic devices [27]. Advances in the rapid fabrication of nano- and microfluidic ...Transduction Microfluidic Processing Sample Introduction Optofluidics Enabled Bio-Sensing A B C Figure 4: (A) Schematic diagram of optofluidic tomography
ERIC Educational Resources Information Center
Cui, Weili; Jones, Wayne E., Jr.; Klotzkin, David; Myers, Greta L.; Wagoner, Shawn; White, Bruce
2015-01-01
Microfabrication is a critical area to many branches of science and engineering. However, to many students accustomed to seeing transistors as things that come in a lab kit, it is an obscure subtopic of their discipline. Beginning in 2009, the authors undertook a broad multidisciplinary approach to bring microfabrication into all aspects of the…
Myllymaa, Sami; Myllymaa, Katja; Korhonen, Hannu; Töyräs, Juha; Jääskeläinen, Juha E; Djupsund, Kaj; Tanila, Heikki; Lappalainen, Reijo
2009-06-15
Modern microfabrication techniques make it possible to develop microelectrode arrays that may be utilized not only in neurophysiological research but also in the clinic, e.g. in neurosurgery and as elements of neural prostheses. The aim of this study was to test whether a flexible microelectrode array is suitable for recording cortical surface field potentials in rats. Polyimide-based microelectrode arrays were fabricated by utilizing microfabrication techniques e.g. photolithography and magnetron sputter deposition. The present microelectrode array consists of eight platinum microelectrodes (round-shaped, Ø: 200 microm), transmission lines and connector pads sandwiched between two thin layers of biocompatible polyimide. The microelectrode arrays were electrochemically characterized by impedance spectroscopy in physiological saline solution and successfully tested in vivo by conducting acute and chronic measurements of evoked potentials on the surface of rat cortex. The arrays proved excellent flexibility and mechanical strength during handling and implantation onto the surface of cortex. The excellent electrochemical characteristics and stable in vivo recordings with high spatiotemporal resolution highlight the potential of these arrays. The fabrication protocol described here allows implementation of several other neural interfaces with different layouts, material selections or target areas either for recording or stimulation purposes.
Xu, Xiaoli; Zhang, Song; Chen, Hui; Kong, Jilie
2009-11-15
Micro-total analysis systems (microTAS) integrate different analytical operations like sample preparation, separation and detection into a single microfabricated device. With the outstanding advantages of low cost, satisfactory analytical efficiency and flexibility in design, highly integrated and miniaturized devices from the concept of microTAS have gained widespread applications, especially in biochemical assays. Electrochemistry is shown to be quite compatible with microanalytical systems for biochemical assays, because of its attractive merits such as simplicity, rapidity, high sensitivity, reduced power consumption, and sample/reagent economy. This review presents recent developments in the integration of electrochemistry in microdevices for biochemical assays. Ingenious microelectrode design and fabrication methods, and versatility of electrochemical techniques are involved. Practical applications of such integrated microsystem in biochemical assays are focused on in situ analysis, point-of-care testing and portable devices. Electrochemical techniques are apparently suited to microsystems, since easy microfabrication of electrochemical elements and a high degree of integration with multi-analytical functions can be achieved at low cost. Such integrated microsystems will play an increasingly important role for analysis of small volume biochemical samples. Work is in progress toward new microdevice design and applications.
Gu, Longjun; Yu, Guodong; Li, Cheuk-Wing
2018-01-02
Since polydimethylsiloxane (PDMS) is notorious for its severe sorption to biological compounds and even nanoparticles, thermoplastics become a promising substrate for microdevices. Although CO 2 laser engraving is an efficient method for thermoplastic device fabrication, it accompanies with poor bonding issues due to severe bulging and large feature size determined by the diameter of laser beam. In this study, a low-cost microfabrication method is proposed by reversibly sealing a 1 mm thick polymethylmethacrylate (PMMA) over an engraving substrate to reduce channel feature size and minimize bulges of laser engraved channels. PMMA, polycarbonate (PC), polystyrene (PS), perfluoroalkoxy alkane (PFA), cyclic-olefin polymers (COP) and polylactic acid (PLA) were found compatible with this sacrificial layer assisted laser engraving technique. Microchannel width as small as ∼40 μm was attainable by a laser beam that was 5 times larger in diameter. Bulging height was significantly reduced to less 5 μm for most substrates, which facilitated leak proof device bonding without channel deformation. Microdevices with high aspect ratio channels were prepared to demonstrate the applicability of this microfabrication method. We believe this fast and low-cost fabrication approach for thermoplastics will be of interest to researchers who have encountered problem with polydimethylsiloxane based microdevices in their applications. Copyright © 2017 Elsevier B.V. All rights reserved.
Novel First-Level Interconnect Techniques for Flip Chip on MEMS Devices
Sutanto, Jemmy; Anand, Sindhu; Patel, Chetan; Muthuswamy, Jit
2013-01-01
Flip-chip packaging is desirable for microelectro-mechanical systems (MEMS) devices because it reduces the overall package size and allows scaling up the number of MEMS chips through 3-D stacks. In this report, we demonstrate three novel techniques to create first-level interconnect (FLI) on MEMS: 1) Dip and attach technology for Ag epoxy; 2) Dispense technology for solder paste; 3) Dispense, pull, and attach technology (DPAT) for solder paste. The above techniques required no additional microfabrication steps, produced no visible surface contamination on the MEMS active structures, and generated high-aspect-ratio interconnects. The developed FLIs were successfully tested on MEMS moveable microelectrodes microfabricated by SUMMiTVTM process producing no apparent detrimental effect due to outgassing. The bumping processes were successfully applied on Al-deposited bond pads of 100 μm × 100 μm with an average bump height of 101.3 μm for Ag and 184.8 μm for solder (63Sn, 37Pb). DPAT for solder paste produced bumps with the aspect ratio of 1.8 or more. The average shear strengths of Ag and solder bumps were 78 MPa and 689 kPa, respectively. The electrical test on Ag bumps at 794 A/cm2 demonstrated reliable electrical interconnects with negligible resistance. These scalable FLI technologies are potentially useful for MEMS flip-chip packaging and 3-D stacking. PMID:24504168
Immobilized enzyme studies in a microscale bioreactor.
Jones, Francis; Forrest, Scott; Palmer, Jim; Lu, Zonghuan; Elmore, John; Elmore, Bill B
2004-01-01
Novel microreactors with immobilized enzymes were fabricated using both silicon and polymer-based microfabrication techniques. The effectiveness of these reactors was examined along with their behavior over time. Urease enzyme was successfully incorporated into microchannels of a polymeric matrix of polydimethylsiloxane and through layer-bylayer self-assembly techniques onto silicon. The fabricated microchannels had cross-sectional dimensions ranging from tens to hundreds of micrometers in width and height. The experimental results for continuous-flow microreactors are reported for the conversion of urea to ammonia by urease enzyme. Urea conversions of >90% were observed.
Quantum Computing Using Superconducting Qubits
2006-04-01
see the right fig.), and (iii) dynamically modifying ( pulsating ) this potential by controlling the motion of the A particles. This allows easy...superconductors with periodic pinning arrays. We show that sample heating by moving vortices produces negative differential resistivity (NDR) of both N- and S...efficient (i.e., using one two-bit operation) QC circuits using modern microfabrication techniques. scheme for this design [1,3] to achieve conditional
Optical Forces Near Microfabricated Devices
2013-08-01
one beam for two power levels , 50mW and 100mW. 50 µm corresponds to the center of the channel...available MIT MEEP package (32). The computational resolution is 32 grid points per lattice constant. Fig 2.2(a) shows the normalized transmission through...a silicon-on-insulator wafer using standard techniques (33). The lattice constant of the photonic crystal can be scaled to place a given guided
NASA Astrophysics Data System (ADS)
Adamson, Kathryn; Candy, Ian; Whitfield, Liz
2015-04-01
Pedogenic calcretes are abundant in arid and semi-arid regions, and they are widely used as proxy records of palaeoclimatic change. Calcrete oxygen (δ18O) and carbon (δ13C) isotopic signatures are indicative of temperature, aridity, or vegetation at the time of calcrete formation. Their microfabrics also reflect carbonate formation mechanisms in response to the prevailing environmental conditions. Many studies have explored calcrete micromorphology or stable isotope composition, but these techniques have not yet been applied simultaneously. This co-analysis is important as it allows us to establish whether calcrete morphology directly reflects environmental change. This study tests the potential of combining these analyses to examine the relationships between calcrete microfabrics, their isotopic signals, and Quaternary climate change. Calcretes from four river terraces of the Rio Alias in southeast Spain have been analysed in detail. On the basis of morphostratigraphic correlation (Maher et al., 2007) and Uranium-series ages (Candy et al., 2005), these span the period from 304 ± 26 ka (MIS 9) to the Holocene. The oldest profiles have therefore been exposed to multiple glacial-interglacial cycles. A total of 37 micromorphological profiles have been used to extract stable oxygen and carbon isotopic indicators from 77 microfacies. The morphological and isotopic complexity of the calcrete profiles increases with progressive age. The oldest samples display multiple calcretisation phases, and their microfabrics have a larger isotopic range than the younger samples. Alpha (non-biogenic) fabrics have higher δ13C and δ18O values than beta (biogenic) fabrics. Strong positive covariance between δ13C and δ18O within all profiles suggests that both isotopes are responding to the same environmental parameter. We suggest that this is relative aridity. The study demonstrates that the detailed co-analysis of calcrete micromorphology and stable isotope signatures allows calcrete formation patterns to be placed into a wider palaeoclimatic context. Importantly, this technique provides a level of detail that is not possible through bulk isotope sampling alone. It demonstrates the potential of this technique to more reliably constrain the palaeoenvironmental significance of secondary carbonates in dryland settings where other proxy records may be poorly preserved.
Polyaniline nanowires-gold nanoparticles hybrid network based chemiresistive hydrogen sulfide sensor
NASA Astrophysics Data System (ADS)
Shirsat, Mahendra D.; Bangar, Mangesh A.; Deshusses, Marc A.; Myung, Nosang V.; Mulchandani, Ashok
2009-02-01
We report a sensitive, selective, and fast responding room temperature chemiresistive sensor for hydrogen sulfide detection and quantification using polyaniline nanowires-gold nanoparticles hybrid network. The sensor was fabricated by facile electrochemical technique. Initially, polyaniline nanowires with a diameter of 250-320 nm bridging the gap between a pair of microfabricated gold electrodes were synthesized using templateless electrochemical polymerization using a two step galvanostatic technique. Polyaniline nanowires were then electrochemically functionalized with gold nanoparticles using cyclic voltammetry technique. These chemiresistive sensors show an excellent limit of detection (0.1 ppb), wide dynamic range (0.1-100 ppb), and very good selectivity and reproducibility.
Silicone Molding and Lifetime Testing of Peripheral Nerve Interfaces for Neuroprostheses
DOE Office of Scientific and Technical Information (OSTI.GOV)
Gupte, Kimaya; Tolosa, Vanessa
Implantable peripheral nerve cuffs have a large application in neuroprostheses as they can be used to restore sensation to those with upper limb amputations. Modern day prosthetics, while lessening the pain associated with phantom limb syndrome, have limited fine motor control and do not provide sensory feedback to patients. Sensory feedback with prosthetics requires communication between the nervous system and limbs, and is still a challenge to accomplish with amputees. Establishing this communication between the peripheral nerves in the arm and artificial limbs is vital as prosthetics research aims to provide sensory feedback to amputees. Peripheral nerve cuffs restore sensationmore » by electrically stimulating certain parts of the nerve in order to create feeling in the hand. Cuff electrodes have an advantage over standard electrodes as they have high selective stimulation by bringing the electrical interface close to the neural tissue in order to selectively activate targeted regions of a peripheral nerve. In order to further improve the selective stimulation of these nerve cuffs, there is need for finer spatial resolution among electrodes. One method to achieve a higher spatial resolution is to increase the electrode density on the cuff itself. Microfabrication techniques can be used to achieve this higher electrode density. Using L-Edit, a layout editor, microfabricated peripheral nerve cuffs were designed with a higher electrode density than the current model. This increase in electrode density translates to an increase in spatial resolution by at least one order of magnitude. Microfabricated devices also have two separate components that are necessary to understand before implantation: lifetime of the device and assembly to prevent nerve damage. Silicone molding procedures were optimized so that devices do not damage nerves in vivo, and lifetime testing was performed on test microfabricated devices to determine their lifetime in vivo. Future work of this project would include fabricating some of the designed devices and seeing how they compare to the current cuffs in terms of their electrical performance, lifetime, shape, and mechanical properties.« less
Stationary phase deposition based on onium salts
Wheeler, David R [Albuquerque, NM; Lewis, Patrick R [Albuquerque, NM; Dirk, Shawn M [Albuquerque, NM; Trudell, Daniel E [Albuquerque, NM
2008-01-01
Onium salt chemistry can be used to deposit very uniform thickness stationary phases on the wall of a gas chromatography column. In particular, the stationary phase can be bonded to non-silicon based columns, especially microfabricated metal columns. Non-silicon microfabricated columns may be manufactured and processed at a fraction of the cost of silicon-based columns. In addition, the method can be used to phase-coat conventional capillary columns or silicon-based microfabricated columns.
Near-field microscopy with a microfabricated solid immersion lens
NASA Astrophysics Data System (ADS)
Fletcher, Daniel Alden
2001-07-01
Diffraction of focused light prevents optical microscopes from resolving features in air smaller than half the wavelength, λ Spatial resolution can be improved by passing light through a sub-wavelength metal aperture scanned close to a sample, but aperture-based probes suffer from low optical throughput, typically below 10-4. An alternate and more efficient technique is solid immersion microscopy in which light is focused through a high refractive index Solid Immersion Lens (SIL). This work describes the fabrication, modeling, and use of a microfabricated SIL to obtain spatial resolution better than the diffraction limit in air with high optical throughput for infrared applications. SILs on the order of 10 μm in diameter are fabricated from single-crystal silicon and integrated onto silicon cantilevers with tips for scanning. We measure a focused spot size of λ/5 with optical throughput better than 10-1 at a wavelength of λ = 9.3 μm. Spatial resolution is improved to λ/10 with metal apertures fabricated directly on the tip of the silicon SIL. Microlenses have reduced spherical aberration and better transparency than large lenses but cannot be made arbitrarily small and still focus. We model the advantages and limitations of focusing in lenses close to the wavelength in diameter using an extension of Mie theory. We also investigate a new contrast mechanism unique to microlenses resulting from the decrease in field-of-view with lens diameter. This technique is shown to achieve λ/4 spatial resolution. We explore applications of the microfabricated silicon SIL for high spatial resolution thermal microscopy and biological spectroscopy. Thermal radiation is collected through the SIL from a heated surface with spatial resolution four times better than that of a diffraction- limited infrared microscope. Using a Fourier-transform infrared spectrometer, we observe absorption peaks in bacteria cells positioned at the focus of the silicon SIL.
Microfabricated spin exchange relaxation free atomic magnetometer
NASA Astrophysics Data System (ADS)
Griffith, W. Clark; Jimenez-Martinez, Ricardo; Preusser, Jan; Knappe, Svenja; Kitching, John
2009-05-01
Methods first developed at NIST for MEMS-based atomic clocks have been applied to magnetic field sensors. The sensors are built around microfabricated alkali-atom vapor cells integrated with micro-optics and a VCSEL light source. Exceptional magnetic field sensitivities can be achieved in a small volume vapor cell, especially when operated in the spin-exchange relaxation free (SERF) regime. In this technique, magnetic resonance broadening due to spin-exchange collisions is suppressed under conditions of high alkali density and low magnetic fields. We have demonstrated sensitivities better than 100 fT/Hz^1/2 with a millimeter scale SERF sensor.ootnotetextV. Shah, S. Knappe, P.D.D. Schwindt, and J. Kitching, Nature Photonics, 1, 649 (2007). Adding flux concentratorsootnotetextW.C. Griffith, R. Jimenez-Martinez, V. Shah, S. Knappe, and J. Kitching, Appl. Phys. Lett., 94, 023502 (2009). around the vapor cell further improves the sensitivity to 10 fT/Hz^1/2, potentially providing a low power, noncryogenic alternative to SQUID sensors.
Rushton, J A; Aldous, M; Himsworth, M D
2014-12-01
Experiments using laser cooled atoms and ions show real promise for practical applications in quantum-enhanced metrology, timing, navigation, and sensing as well as exotic roles in quantum computing, networking, and simulation. The heart of many of these experiments has been translated to microfabricated platforms known as atom chips whose construction readily lend themselves to integration with larger systems and future mass production. To truly make the jump from laboratory demonstrations to practical, rugged devices, the complex surrounding infrastructure (including vacuum systems, optics, and lasers) also needs to be miniaturized and integrated. In this paper we explore the feasibility of applying this approach to the Magneto-Optical Trap; incorporating the vacuum system, atom source and optical geometry into a permanently sealed micro-litre system capable of maintaining 10(-10) mbar for more than 1000 days of operation with passive pumping alone. We demonstrate such an engineering challenge is achievable using recent advances in semiconductor microfabrication techniques and materials.
NASA Astrophysics Data System (ADS)
Rushton, J. A.; Aldous, M.; Himsworth, M. D.
2014-12-01
Experiments using laser cooled atoms and ions show real promise for practical applications in quantum-enhanced metrology, timing, navigation, and sensing as well as exotic roles in quantum computing, networking, and simulation. The heart of many of these experiments has been translated to microfabricated platforms known as atom chips whose construction readily lend themselves to integration with larger systems and future mass production. To truly make the jump from laboratory demonstrations to practical, rugged devices, the complex surrounding infrastructure (including vacuum systems, optics, and lasers) also needs to be miniaturized and integrated. In this paper we explore the feasibility of applying this approach to the Magneto-Optical Trap; incorporating the vacuum system, atom source and optical geometry into a permanently sealed micro-litre system capable of maintaining 10-10 mbar for more than 1000 days of operation with passive pumping alone. We demonstrate such an engineering challenge is achievable using recent advances in semiconductor microfabrication techniques and materials.
Advances in on-chip photodetection for applications in miniaturized genetic analysis systems
NASA Astrophysics Data System (ADS)
Namasivayam, Vijay; Lin, Rongsheng; Johnson, Brian; Brahmasandra, Sundaresh; Razzacki, Zafar; Burke, David T.; Burns, Mark A.
2004-01-01
Microfabrication techniques have become increasingly popular in the development of next generation DNA analysis devices. Improved on-chip fluorescence detection systems may have applications in developing portable hand-held instruments for point-of-care diagnostics. Miniaturization of fluorescence detection involves construction of ultra-sensitive photodetectors that can be integrated onto a fluidic platform combined with the appropriate optical emission filters. We have previously demonstrated integration PIN photodiodes onto a microfabricated electrophoresis channel for separation and detection of DNA fragments. In this work, we present an improved detector structure that uses a PINN+ photodiode with an on-chip interference filter and a robust liquid barrier layer. This new design yields high sensitivity (detection limit of 0.9 ng µl-1 of DNA), low-noise (S/N ~ 100/1) and enhanced quantum efficiencies (>80%) over the entire visible spectrum. Applications of these photodiodes in various areas of DNA analysis such as microreactions (PCR), separations (electrophoresis) and microfluidics (drop sensing) are presented.
Microfabricated Microwave-Integrated Surface Ion Trap
NASA Astrophysics Data System (ADS)
Revelle, Melissa C.; Blain, Matthew G.; Haltli, Raymond A.; Hollowell, Andrew E.; Nordquist, Christopher D.; Maunz, Peter
2017-04-01
Quantum information processing holds the key to solving computational problems that are intractable with classical computers. Trapped ions are a physical realization of a quantum information system in which qubits are encoded in hyperfine energy states. Coupling the qubit states to ion motion, as needed for two-qubit gates, is typically accomplished using Raman laser beams. Alternatively, this coupling can be achieved with strong microwave gradient fields. While microwave radiation is easier to control than a laser, it is challenging to precisely engineer the radiated microwave field. Taking advantage of Sandia's microfabrication techniques, we created a surface ion trap with integrated microwave electrodes with sub-wavelength dimensions. This multi-layered device permits co-location of the microwave antennae and the ion trap electrodes to create localized microwave gradient fields and necessary trapping fields. Here, we characterize the trap design and present simulated microwave performance with progress towards experimental results. This research was funded, in part, by the Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity (IARPA).
DOE Office of Scientific and Technical Information (OSTI.GOV)
Rushton, J. A.; Aldous, M.; Himsworth, M. D., E-mail: m.d.himsworth@soton.ac.uk
2014-12-15
Experiments using laser cooled atoms and ions show real promise for practical applications in quantum-enhanced metrology, timing, navigation, and sensing as well as exotic roles in quantum computing, networking, and simulation. The heart of many of these experiments has been translated to microfabricated platforms known as atom chips whose construction readily lend themselves to integration with larger systems and future mass production. To truly make the jump from laboratory demonstrations to practical, rugged devices, the complex surrounding infrastructure (including vacuum systems, optics, and lasers) also needs to be miniaturized and integrated. In this paper we explore the feasibility of applyingmore » this approach to the Magneto-Optical Trap; incorporating the vacuum system, atom source and optical geometry into a permanently sealed micro-litre system capable of maintaining 10{sup −10} mbar for more than 1000 days of operation with passive pumping alone. We demonstrate such an engineering challenge is achievable using recent advances in semiconductor microfabrication techniques and materials.« less
Hybrid microfabrication of nanofiber-based sheets and rods for tissue engineering applications.
Park, Suk-Hee; Kim, Min Sung; Lee, Dasom; Choi, Yong Whan; Kim, Deok-Ho; Suh, Kahp-Yang
2013-12-01
Electrospun nanofibers have been developed into a variety of forms for tissue engineering scaffolds to regulate the cellular functions guided by nanotopographical cues. Here, we have successfully fabricated nanofiber-based scaffold complexes of rod and sheet type by combining the three microfabrication techniques of electrospinning, spin coating, and polymer melt deposition. It was demonstrated that this hybrid fabrication could produce uniaxially aligned nanofiber scaffolds supported by a thin film, allowing for a mechanically enforced substrate for cell culture as well as facile scaffold manipulation. The results of cell analysis indicated that nanofibers on spin-coated films could provide contact guidance effects on cells and retain them even after manipulation. As an application of the cell-laden nanofiber film, we built a rod-type structure by rolling up the film around a mechanically supporting core microfiber, which was incorporated by polymer melt deposition. A biocompatible and biodegradable polymer, polycaprolactone, was used throughout the processes and thus could be used as a directly implantable substitute in tissue regeneration.
Center for Innovative Minimally Invasive Therapy (CIMIT)
2004-10-01
diffuse through to deeper tissue to underlying capillaries. The same principle can be applied to oral drug delivery. Using microfabrication techniques...Steven L. The Effects of Testing Environment on the Viscoelastic Properties of Soft Tissues . In S. Cotin and D. Metaxas (Eds.): ISMS 2003, LNCS 3078, pp. 9...cardiomyocytes in mammals. Regeneration of myocardial tissue is an actively developing area of research aiming to restore cardiac function. We hypothesized that a
NeuroMEMS: Neural Probe Microtechnologies
HajjHassan, Mohamad; Chodavarapu, Vamsy; Musallam, Sam
2008-01-01
Neural probe technologies have already had a significant positive effect on our understanding of the brain by revealing the functioning of networks of biological neurons. Probes are implanted in different areas of the brain to record and/or stimulate specific sites in the brain. Neural probes are currently used in many clinical settings for diagnosis of brain diseases such as seizers, epilepsy, migraine, Alzheimer's, and dementia. We find these devices assisting paralyzed patients by allowing them to operate computers or robots using their neural activity. In recent years, probe technologies were assisted by rapid advancements in microfabrication and microelectronic technologies and thus are enabling highly functional and robust neural probes which are opening new and exciting avenues in neural sciences and brain machine interfaces. With a wide variety of probes that have been designed, fabricated, and tested to date, this review aims to provide an overview of the advances and recent progress in the microfabrication techniques of neural probes. In addition, we aim to highlight the challenges faced in developing and implementing ultra-long multi-site recording probes that are needed to monitor neural activity from deeper regions in the brain. Finally, we review techniques that can improve the biocompatibility of the neural probes to minimize the immune response and encourage neural growth around the electrodes for long term implantation studies. PMID:27873894
Zhu, Haixin; Zhou, Xianfeng; Su, Fengyu; Tian, Yanqing; Ashili, Shashanka; Holl, Mark R; Meldrum, Deirdre R
2012-10-01
We report a novel method for wafer level, high throughput optical chemical sensor patterning, with precise control of the sensor volume and capability of producing arbitrary microscale patterns. Monomeric oxygen (O(2)) and pH optical probes were polymerized with 2-hydroxyethyl methacrylate (HEMA) and acrylamide (AM) to form spin-coatable and further crosslinkable polymers. A micro-patterning method based on micro-fabrication techniques (photolithography, wet chemical process and reactive ion etch) was developed to miniaturize the sensor film onto glass substrates in arbitrary sizes and shapes. The sensitivity of fabricated micro-patterns was characterized under various oxygen concentrations and pH values. The process for spatially integration of two sensors (Oxygen and pH) on the same substrate surface was also developed, and preliminary fabrication and characterization results were presented. To the best of our knowledge, it is the first time that poly (2-hydroxylethyl methacrylate)-co-poly (acrylamide) (PHEMA-co-PAM)-based sensors had been patterned and integrated at the wafer level with micron scale precision control using microfabrication techniques. The developed methods can provide a feasible way to miniaturize and integrate the optical chemical sensor system and can be applied to any lab-on-a-chip system, especially the biological micro-systems requiring optical sensing of single or multiple analytes.
Biomedical microfluidic devices by using low-cost fabrication techniques: A review.
Faustino, Vera; Catarino, Susana O; Lima, Rui; Minas, Graça
2016-07-26
One of the most popular methods to fabricate biomedical microfluidic devices is by using a soft-lithography technique. However, the fabrication of the moulds to produce microfluidic devices, such as SU-8 moulds, usually requires a cleanroom environment that can be quite costly. Therefore, many efforts have been made to develop low-cost alternatives for the fabrication of microstructures, avoiding the use of cleanroom facilities. Recently, low-cost techniques without cleanroom facilities that feature aspect ratios more than 20, for fabricating those SU-8 moulds have been gaining popularity among biomedical research community. In those techniques, Ultraviolet (UV) exposure equipment, commonly used in the Printed Circuit Board (PCB) industry, replaces the more expensive and less available Mask Aligner that has been used in the last 15 years for SU-8 patterning. Alternatively, non-lithographic low-cost techniques, due to their ability for large-scale production, have increased the interest of the industrial and research community to develop simple, rapid and low-cost microfluidic structures. These alternative techniques include Print and Peel methods (PAP), laserjet, solid ink, cutting plotters or micromilling, that use equipment available in almost all laboratories and offices. An example is the xurography technique that uses a cutting plotter machine and adhesive vinyl films to generate the master moulds to fabricate microfluidic channels. In this review, we present a selection of the most recent lithographic and non-lithographic low-cost techniques to fabricate microfluidic structures, focused on the features and limitations of each technique. Only microfabrication methods that do not require the use of cleanrooms are considered. Additionally, potential applications of these microfluidic devices in biomedical engineering are presented with some illustrative examples. Copyright © 2015 Elsevier Ltd. All rights reserved.
Compact self-aligning assemblies with refractive microlens arrays made by contactless embossing
NASA Astrophysics Data System (ADS)
Schulze, Jens; Ehrfeld, Wolfgang; Mueller, Holger; Picard, Antoni
1998-04-01
The hybrid integration of microlenses and arrays of microlenses in micro-optical systems is simplified using contactless embossing of microlenses (CEM) in combination with LIGA microfabrication. CEM is anew fabrication technique for the production of precise refractive microlens arrays. A high precision matrix of holes made by LIGA technique is used as a compression molding tool to form the microlenses. The tool is pressed onto a thermoplastic sample which is heated close to the glass transformation temperature of the material. The material bulges into the openings of the molding tool due to the applied pressure and forms lens-like spherical structures. The name refers to the fact that the surface of the microlens does not get in contact with the compression molding tool during the shaping process and optical quality of the surface is maintained. Microlenses and arrays of microlenses with lens diameters from 30 micrometers up to 700 micrometers and numerical aperture values of up to 0.25 have been fabricated in different materials. Cost-effectiveness in the production process, excellent optical performance and the feature of easy replication are the main advantages of this technique. The most promising feature of this method is the possibility to obtain self- aligned assemblies then can be further integrated into a micro-optical bench setup. The CEM fabrication method in combination with LIGA microfabrication considerably enhances the hybrid integration in micro-optical devices which results in a more cost-effective production of compact micro-opto-electro-mechanical systems.
Microfabricated Tactile Sensors for Biomedical Applications: A Review
Saccomandi, Paola; Schena, Emiliano; Oddo, Calogero Maria; Zollo, Loredana; Silvestri, Sergio; Guglielmelli, Eugenio
2014-01-01
During the last decades, tactile sensors based on different sensing principles have been developed due to the growing interest in robotics and, mainly, in medical applications. Several technological solutions have been employed to design tactile sensors; in particular, solutions based on microfabrication present several attractive features. Microfabrication technologies allow for developing miniaturized sensors with good performance in terms of metrological properties (e.g., accuracy, sensitivity, low power consumption, and frequency response). Small size and good metrological properties heighten the potential role of tactile sensors in medicine, making them especially attractive to be integrated in smart interfaces and microsurgical tools. This paper provides an overview of microfabricated tactile sensors, focusing on the mean principles of sensing, i.e., piezoresistive, piezoelectric and capacitive sensors. These sensors are employed for measuring contact properties, in particular force and pressure, in three main medical fields, i.e., prosthetics and artificial skin, minimal access surgery and smart interfaces for biomechanical analysis. The working principles and the metrological properties of the most promising tactile, microfabricated sensors are analyzed, together with their application in medicine. Finally, the new emerging technologies in these fields are briefly described. PMID:25587432
Microfabricated tactile sensors for biomedical applications: a review.
Saccomandi, Paola; Schena, Emiliano; Oddo, Calogero Maria; Zollo, Loredana; Silvestri, Sergio; Guglielmelli, Eugenio
2014-12-01
During the last decades, tactile sensors based on different sensing principles have been developed due to the growing interest in robotics and, mainly, in medical applications. Several technological solutions have been employed to design tactile sensors; in particular, solutions based on microfabrication present several attractive features. Microfabrication technologies allow for developing miniaturized sensors with good performance in terms of metrological properties (e.g., accuracy, sensitivity, low power consumption, and frequency response). Small size and good metrological properties heighten the potential role of tactile sensors in medicine, making them especially attractive to be integrated in smart interfaces and microsurgical tools. This paper provides an overview of microfabricated tactile sensors, focusing on the mean principles of sensing, i.e., piezoresistive, piezoelectric and capacitive sensors. These sensors are employed for measuring contact properties, in particular force and pressure, in three main medical fields, i.e., prosthetics and artificial skin, minimal access surgery and smart interfaces for biomechanical analysis. The working principles and the metrological properties of the most promising tactile, microfabricated sensors are analyzed, together with their application in medicine. Finally, the new emerging technologies in these fields are briefly described.
Microfabrication of IPMC cilia for bio-inspired flow sensing
NASA Astrophysics Data System (ADS)
Lei, Hong; Li, Wen; Tan, Xiaobo
2012-04-01
As the primary flow sensing organ for fishes, the lateral line system plays a critical role in fish behavior. Analogous to its biological counterpart, an artificial lateral line system, consisting of arrays of micro flow sensors, is expected to be instrumental in the navigation and control of underwater robots. In this paper we investigate the microfabrication of ionic polymer-metal composite (IPMC) cilia for the purpose of flow sensing. While existing macro- and microfabrication methods for IPMCs have predominantly focused on planar structures, we propose a device where micro IPMC beams stand upright on a substrate to effectively interact with the flow. Challenges in the casting of 3D Nafion structure and selective formation of electrodes are discussed, and potential solutions for addressing these challenges are presented together with preliminary microfabrication results.
Adaptation of ion beam technology to microfabrication of solid state devices and transducers
NASA Technical Reports Server (NTRS)
Topich, J. A.
1978-01-01
A number of areas were investigated to determine the potential uses of ion beam techniques in the construction of solid state devices and transducers and the packaging of implantable electronics for biomedical applications. The five areas investigated during the past year were: (1) diode-like devices fabricated on textured silicon; (2) a photolithographic technique for patterning ion beam sputtered PVC (polyvinyl chloride); (3) use of sputtered Teflon as a protective coating for implantable pressure sensors; (4) the sputtering of Macor to seal implantable hybrid circuits; and (5) the use of sputtered Teflon to immobilize enzymes.
Microfabricated diffusion source
Oborny, Michael C [Albuquerque, NM; Frye-Mason, Gregory C [Cedar Crest, NM; Manginell, Ronald P [Albuquerque, NM
2008-07-15
A microfabricated diffusion source to provide for a controlled diffusion rate of a vapor comprises a porous reservoir formed in a substrate that can be filled with a liquid, a headspace cavity for evaporation of the vapor therein, a diffusion channel to provide a controlled diffusion of the vapor, and an outlet to release the vapor into a gas stream. The microfabricated diffusion source can provide a calibration standard for a microanalytical system. The microanalytical system with an integral diffusion source can be fabricated with microelectromechanical systems technologies.
Monolithic multinozzle emitters for nanoelectrospray mass spectrometry
Wang, Daojing [Daly City, CA; Yang, Peidong [Kensington, CA; Kim, Woong [Seoul, KR; Fan, Rong [Pasadena, CA
2011-09-20
Novel and significantly simplified procedures for fabrication of fully integrated nanoelectrospray emitters have been described. For nanofabricated monolithic multinozzle emitters (NM.sup.2 emitters), a bottom up approach using silicon nanowires on a silicon sliver is used. For microfabricated monolithic multinozzle emitters (M.sup.3 emitters), a top down approach using MEMS techniques on silicon wafers is used. The emitters have performance comparable to that of commercially-available silica capillary emitters for nanoelectrospray mass spectrometry.
Fabrication of optical ring resonators in silicon on insulator
NASA Astrophysics Data System (ADS)
Headley, William R.; Reed, Graham T.; Liu, Ansheng; Cohen, Oded; Hak, D.; Paniccia, Mario J.; Howe, Simon; Huille, Inga
2004-07-01
In an effort to determine low-cost alternatives for components currently used in DWDM, optical ring resonators are currently being investigated. The well-known microfabrication techniques of silicon, coupled with the low propagation loss of single crystal silicon, make SOI an attractive material. Laterally coupled racetrack resonators utilising rib waveguides have been fabricated and preliminary results are discussed. An extinction ratio of 15.9 dB and a finesse of 11 have been measured.
MEMS/MOEMS foundry services at INO
NASA Astrophysics Data System (ADS)
García-Blanco, Sonia; Ilias, Samir; Williamson, Fraser; Généreux, Francis; Le Noc, Loïc; Poirier, Michel; Proulx, Christian; Tremblay, Bruno; Provençal, Francis; Desroches, Yan; Caron, Jean-Sol; Larouche, Carl; Beaupré, Patrick; Fortin, Benoit; Topart, Patrice; Picard, Francis; Alain, Christine; Pope, Timothy; Jerominek, Hubert
2010-06-01
In the MEMS manufacturing world, the "fabless" model is getting increasing importance in recent years as a way for MEMS manufactures and startups to minimize equipment costs and initial capital investment. In order for this model to be successful, the fabless company needs to work closely with a MEMS foundry service provider. Due to the lack of standardization in MEMS processes, as opposed to CMOS microfabrication, the experience in MEMS development processes and the flexibility of the MEMS foundry are of vital importance. A multidisciplinary team together with a complete microfabrication toolset allows INO to offer unique MEMS foundry services to fabless companies looking for low to mid-volume production. Companies that benefit from their own microfabrication facilities can also be interested in INO's assistance in conducting their research and development work during periods where production runs keep their whole staff busy. Services include design, prototyping, fabrication, packaging, and testing of various MEMS and MOEMS devices on wafers fully compatible with CMOS integration. Wafer diameters ranging typically from 1 inch to 6 inches can be accepted while 8-inch wafers can be processed in some instances. Standard microfabrication techniques such as metal, dielectric, and semiconductor film deposition and etching as well as photolithographic pattern transfer are available. A stepper permits reduction of the critical dimension to around 0.4 μm. Metals deposited by vacuum deposition methods include Au, Ag, Al, Al alloys, Ti, Cr, Cu, Mo, MoCr, Ni, Pt, and V with thickness varying from 5 nm to 2 μm. Electroplating of several materials including Ni, Au and In is also available. In addition, INO has developed and built a gold black deposition facility to answer customer's needs for broadband microbolometric detectors. The gold black deposited presents specular reflectance of less than 10% in the wavelength range from 0.2 μm to 100 μm with thickness ranging from 20 to 35 μm and a density of 0.3% the bulk density of gold. Two Balzers thin-film deposition instruments (BAP-800 and BAK-760) permit INO to offer optical thin film manufacturing. Recent work in this field includes the design and development of a custom filter for the James Webb Space Telescope (JWST) as collaboration with the Canadian company ComDEV. An overview of the different microfabrication foundry services offered by INO will be presented together with the most recent achievements in the field of MEMS/MOEMS.
Xing, Jin-Feng; Zheng, Mei-Ling; Duan, Xuan-Ming
2015-08-07
3D printing technology has attracted much attention due to its high potential in scientific and industrial applications. As an outstanding 3D printing technology, two-photon polymerization (TPP) microfabrication has been applied in the fields of micro/nanophotonics, micro-electromechanical systems, microfluidics, biomedical implants and microdevices. In particular, TPP microfabrication is very useful in tissue engineering and drug delivery due to its powerful fabrication capability for precise microstructures with high spatial resolution on both the microscopic and the nanometric scale. The design and fabrication of 3D hydrogels widely used in tissue engineering and drug delivery has been an important research area of TPP microfabrication. The resolution is a key parameter for 3D hydrogels to simulate the native 3D environment in which the cells reside and the drug is controlled to release with optimal temporal and spatial distribution in vitro and in vivo. The resolution of 3D hydrogels largely depends on the efficiency of TPP initiators. In this paper, we will review the widely used photoresists, the development of TPP photoinitiators, the strategies for improving the resolution and the microfabrication of 3D hydrogels.
Mao, Sifeng; Zhang, Yong; Zhang, Weifei; Zeng, Hulie; Nakajima, Hizuru; Lin, Jin-Ming; Uchiyama, Katsumi
2017-09-06
A four-aperture microchemical pen was used to produce a stable convection-diffusion layer in an "open space" for microreactions and microfabrication. The process represents a new method for microreactions and microfabrication in a convection-diffusion layer. To prove the concept of a convection-diffusion layer in an "open space", bovine serum albumin was labeled with 4-fluoro-7-nitro-2,1,3-benzoxadiazole to confirm that the small convection-diffusion layer was effective for local surface treatment. To demonstrate the potential for microfabrication, silver patterns were fabricated on a glass surface with a convection-diffusion layer by using the silver-mirror reaction. The widths of each silver pattern could be easily controlled from 10 to 60 μm. Patterned silver lines with uniform widths or gradient widths were prepared. This is the first proof of concept study of a convection-diffusion layer in an "open space" used in local surface treatment and microfabrication on a surface. The microchemical pen represents a potential method for the region-selective microtreatment of tissues, cells, and other biological interfaces. © 2017 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.
Microfabrication of high performance optical diaphragm by plasma ion beam etching technology
NASA Astrophysics Data System (ADS)
Mestreau, Agnes; Bernardet, Henri; Dancoing, Guy; Godechot, Xavier; Pezant, Christian; Stenger, Vincent; Cousin, Bernard; Etcheto, Pierre; Otrio, Georges
2018-04-01
This paper, "Microfabrication of high performance optical diaphragm by plasma ion beam etching technology," was presented as part of International Conference on Space Optics—ICSO 1997, held in Toulouse, France.
Microfabrics in Siliceous Hotsprings: Yellowstone National Park, Wyoming
NASA Technical Reports Server (NTRS)
Guidry, S. A.; Chafetz, H. S.; Westall, F.
2001-01-01
Microfabrics shed light on the mechanisms governing siliceous sinter precipitation, the profound effects of microorganisms, as well as a conventional facies model for siliceous hotsprings. Additional information is contained in the original extended abstract.
Silicon Micromachined Microlens Array for THz Antennas
NASA Technical Reports Server (NTRS)
Lee, Choonsup; Chattopadhyay, Goutam; Mehdi, IImran; Gill, John J.; Jung-Kubiak, Cecile D.; Llombart, Nuria
2013-01-01
5 5 silicon microlens array was developed using a silicon micromachining technique for a silicon-based THz antenna array. The feature of the silicon micromachining technique enables one to microfabricate an unlimited number of microlens arrays at one time with good uniformity on a silicon wafer. This technique will resolve one of the key issues in building a THz camera, which is to integrate antennas in a detector array. The conventional approach of building single-pixel receivers and stacking them to form a multi-pixel receiver is not suited at THz because a single-pixel receiver already has difficulty fitting into mass, volume, and power budgets, especially in space applications. In this proposed technique, one has controllability on both diameter and curvature of a silicon microlens. First of all, the diameter of microlens depends on how thick photoresist one could coat and pattern. So far, the diameter of a 6- mm photoresist microlens with 400 m in height has been successfully microfabricated. Based on current researchers experiences, a diameter larger than 1-cm photoresist microlens array would be feasible. In order to control the curvature of the microlens, the following process variables could be used: 1. Amount of photoresist: It determines the curvature of the photoresist microlens. Since the photoresist lens is transferred onto the silicon substrate, it will directly control the curvature of the silicon microlens. 2. Etching selectivity between photoresist and silicon: The photoresist microlens is formed by thermal reflow. In order to transfer the exact photoresist curvature onto silicon, there needs to be etching selectivity of 1:1 between silicon and photoresist. However, by varying the etching selectivity, one could control the curvature of the silicon microlens. The figure shows the microfabricated silicon microlens 5 x5 array. The diameter of the microlens located in the center is about 2.5 mm. The measured 3-D profile of the microlens surface has a smooth curvature. The measured height of the silicon microlens is about 280 microns. In this case, the original height of the photoresist was 210 microns. The change was due to the etching selectivity of 1.33 between photoresist and silicon. The measured surface roughness of the silicon microlens shows the peak-to-peak surface roughness of less than 0.5 microns, which is adequate in THz frequency. For example, the surface roughness should be less than 7 microns at 600 GHz range. The SEM (scanning electron microscope) image of the microlens confirms the smooth surface. The beam pattern at 550 GHz shows good directivity.
Theisen, C Harwood; Sumner, D Y; Mackey, T J; Lim, D S S; Brady, A L; Slater, G F
2015-07-01
Modern microbialites in Pavilion Lake, BC, provide an analog for ancient non-stromatolitic microbialites that formed from in situ mineralization. Because Pavilion microbialites are mineralizing under the influence of microbial communities, they provide insights into how biological processes influence microbialite microfabrics and mesostructures. Hemispherical nodules and micrite-microbial crusts are two mesostructures within Pavilion microbialites that are directly associated with photosynthetic communities. Both filamentous cyanobacteria in hemispherical nodules and branching filamentous green algae in micrite-microbial crusts were associated with calcite precipitation at microbialite surfaces and with characteristic microfabrics in the lithified microbialite. Hemispherical nodules formed at microbialite surfaces when calcite precipitated around filamentous cyanobacteria with a radial growth habit. The radial filament pattern was preserved within the microbialite to varying degrees. Some subsurface nodules contained well-defined filaments, whereas others contained only dispersed organic inclusions. Variation in filament preservation is interpreted to reflect differences in timing and amount of carbonate precipitation relative to heterotrophic decay, with more defined filaments reflecting greater lithification prior to degradation than more diffuse filaments. Micrite-microbial crusts produce the second suite of microfabrics and form in association with filamentous green algae oriented perpendicular to the microbialite surface. Some crusts include calcified filaments, whereas others contained voids that reflect the filamentous community in shape, size, and distribution. Pavilion microbialites demonstrate that microfabric variation can reflect differences in lithification processes and microbial metabolisms as well as microbial community morphology and organization. Even when the morphology of individual filaments or cells is not well preserved, the microbial growth habit can be captured in mesoscale microbialite structures. These results suggest that when petrographic preservation is extremely good, ancient microbialite growth structures and microfabrics can be interpreted in the context of variation in community organization, community composition, and lithification history. Even in the absence of distinct microbial microfabrics, mesostructures can capture microbial community morphology. © 2015 John Wiley & Sons Ltd.
Advanced carbon manufacturing for energy and biological applications
NASA Astrophysics Data System (ADS)
Turon Teixidor, Genis
The science of miniaturization has experienced revolutionary advances during the last decades, witnessing the development of the Integrated Circuit and the emergence of MEMS and Nanotechnology. Particularly, MEMS technology has pioneered the use of non-traditional materials in microfabrication by including polymers, ceramics and composites to the well known list of metals and semiconductors. One of the latest additions to this set of materials is carbon, which represents a very important inclusion given its significance in electrochemical energy conversion systems and in applications where it is used as sensor probe material. For these applications, carbon is optimal in several counts: It has a wide electrochemical stability window, good electrical and thermal conductivity, high corrosion resistance and mechanical stability, and is available in high purity at a low cost. Furthermore carbon is biocompatible. This thesis presents several microfabricated devices that take advantage of these properties. The thesis has two clearly differentiated parts. In the first one, applications of micromachined carbon in the field of energy conversion and energy storage are presented. These applications include lithium ion micro batteries and the development of new carbon electrodes with fractal geometries. In the second part, the focus shifts to biological applications. First, the study of the interaction of living cells with micromachined carbon is presented, followed by the description of a sensor based on interdigitated nano-electrode arrays, and finally the development of the new instrumentation needed to address arrays of carbon electrodes, a multiplexed potentiostat. The underlying theme that connects all these seemingly different topics is the use of carbon microfabrication techniques in electrochemical systems.
Microfabricated Waveguide Atom Traps.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Jau, Yuan-Yu
A nanoscale , microfabricated waveguide structure can in - principle be used to trap atoms in well - defined locations and enable strong photon-atom interactions . A neutral - atom platform based on this microfabrication technology will be prealigned , which is especially important for quantum - control applications. At present, there is still no reported demonstration of evanescent - field atom trapping using a microfabricated waveguide structure. We described the capabilities established by our team for future development of the waveguide atom - trapping technology at SNL and report our studies to overcome the technical challenges of loading coldmore » atoms into the waveguide atom traps, efficient and broadband optical coupling to a waveguide, and the waveguide material for high - power optical transmission. From the atomic - physics and the waveguide modeling, w e have shown that a square nano-waveguide can be utilized t o achieve better atomic spin squeezing than using a nanofiber for first time.« less
Microfabricated Segmented-Involute-Foil Regenerator for Stirling Engines
NASA Technical Reports Server (NTRS)
Ibrahim, Mounir; Danila, Daniel; Simon, Terrence; Mantell, Susan; Sun, Liyong; Gedeon, David; Qiu, Songgang; Wood, Gary; Kelly, Kevin; McLean, Jeffrey
2010-01-01
An involute-foil regenerator was designed, microfabricated, and tested in an oscillating-flow test rig. The concept consists of stacked involute-foil nickel disks (see figure) microfabricated via a lithographic process. Test results yielded a performance of about twice that of the 90-percent random-fiber currently used in small Stirling converters. The segmented nature of the involute- foil in both the axial and radial directions increases the strength of the structure relative to wrapped foils. In addition, relative to random-fiber regenerators, the involute-foil has a reduced pressure drop, and is expected to be less susceptible to the release of metal fragments into the working space, thus increasing reliability. The prototype nickel involute-foil regenerator was adequate for testing in an engine with a 650 C hot-end temperature. This is lower than that required by larger engines, and high-temperature alloys are not suited for the lithographic microfabrication approach.
NASA Astrophysics Data System (ADS)
Haberko, Jakub; Wasylczyk, Piotr
2018-03-01
We demonstrate that a stochastic optimization algorithm with a properly chosen, weighted fitness function, following a global variation of parameters upon each step can be used to effectively design reflective polarizing optical elements. Two sub-wavelength metallic metasurfaces, corresponding to broadband half- and quarter-waveplates are demonstrated with simple structure topology, a uniform metallic coating and with the design suited for the currently available microfabrication techniques, such as ion milling or 3D printing.
A Program of Research on Microfabrication Techniques for VLSI Magnetic Devices.
1982-10-01
contribution to the implantation- induced uniaxial anisotropy field change. BACKGROUND Magnetic garnet films are grown by liquid phase epitaxy ( LPE ) on non...a single crystal, non-magnetic garnet substrate by the liquid phase epitaxy ( LPE ) method. These thin films , usually one to three microns in thickness...microscopy. Experimental Procedures Films of (SmYGdTm)3Ca0a.Fe4.6012 garnet were grown by liquid phase epitaxy ( LPE ) on gadolinium-gallium garnet (GGG
A Program of Research on Microfabrication Techniques for VLSI Magnetic Devices.
1981-10-01
micrometer bubble diameter materials so that we can evaluate them as device materials. A detailed report on the LPE growth of garnet films at CMU is included...Figure 2: Growth Rate versus Growth Temperature Growth Rate The growth rate of the LPE film is determined by the concentration of garnet in the melt, the...selectively modifying, and characterizing single Lcrystal epitaxial garnet hnd amorphous magnetic thin films are being investi- *_ gated with the
Energy harvesting from cerebrospinal fluid pressure fluctuations for self-powered neural implants.
Beker, Levent; Benet, Arnau; Meybodi, Ali Tayebi; Eovino, Ben; Pisano, Albert P; Lin, Liwei
2017-06-01
In this paper, a novel method to generate electrical energy by converting available mechanical energy from pressure fluctuations of the cerebrospinal fluid within lateral ventricles of the brain is presented. The generated electrical power can be supplied to the neural implants and either eliminate their battery need or extend the battery lifespan. A diaphragm type harvester comprised of piezoelectric material is utilized to convert the pressure fluctuations to electrical energy. The pressure fluctuations cause the diaphragm to bend, and the strained piezoelectric materials generate electricity. In the framework of this study, an energy harvesting structure having a diameter of 2.5 mm was designed and fabricated using microfabrication techniques. A 1:1 model of lateral ventricles was 3D-printed from raw MRI images to characterize the harvester. Experimental results show that a maximum power of 0.62 nW can be generated from the harvester under similar physical conditions in lateral ventricles which corresponds to energy density of 12.6 nW/cm 2 . Considering the available area within the lateral ventricles and the size of harvesters that can be built using microfabrication techniques it is possible to amplify to power up to 26 nW. As such, the idea of generating electrical energy by making use of pressure fluctuations within brain is demonstrated in this work via the 3D-printed model system.
Zhu, Haixin; Zhou, Xianfeng; Su, Fengyu; Tian, Yanqing; Ashili, Shashanka; Holl, Mark R.; Meldrum, Deirdre R.
2012-01-01
We report a novel method for wafer level, high throughput optical chemical sensor patterning, with precise control of the sensor volume and capability of producing arbitrary microscale patterns. Monomeric oxygen (O2) and pH optical probes were polymerized with 2-hydroxyethyl methacrylate (HEMA) and acrylamide (AM) to form spin-coatable and further crosslinkable polymers. A micro-patterning method based on micro-fabrication techniques (photolithography, wet chemical process and reactive ion etch) was developed to miniaturize the sensor film onto glass substrates in arbitrary sizes and shapes. The sensitivity of fabricated micro-patterns was characterized under various oxygen concentrations and pH values. The process for spatially integration of two sensors (Oxygen and pH) on the same substrate surface was also developed, and preliminary fabrication and characterization results were presented. To the best of our knowledge, it is the first time that poly (2-hydroxylethyl methacrylate)-co-poly (acrylamide) (PHEMA-co-PAM)-based sensors had been patterned and integrated at the wafer level with micron scale precision control using microfabrication techniques. The developed methods can provide a feasible way to miniaturize and integrate the optical chemical sensor system and can be applied to any lab-on-a-chip system, especially the biological micro-systems requiring optical sensing of single or multiple analytes. PMID:23175599
Medintz, Igor; Wong, Wendy W.; Berti, Lorenzo; Shiow, Lawrence; Tom, Jennifer; Scherer, James; Sensabaugh, George; Mathies, Richard A.
2001-01-01
An assay is described for high-throughput single nucleotide polymorphism (SNP) genotyping on a microfabricated capillary array electrophoresis (CAE) microchip. The assay targets the three common variants at the HFE locus associated with the genetic disease hereditary hemochromatosis (HHC). The assay employs allele-specific PCR (ASPCR) for the C282Y (845g->a), H63D (187c->g), and S65C (193a->t) variants using fluorescently-labeled energy-transfer (ET) allele-specific primers. Using a 96-channel radial CAE microplate, the labeled ASPCR products generated from 96 samples in a reference Caucasian population are simultaneously separated with single-base-pair resolution and genotyped in under 10 min. Detection is accomplished with a laser-excited rotary four-color fluorescence scanner. The allele-specific amplicons are differentiated on the basis of both their size and the color of the label emission. This study is the first demonstration of the combined use of ASPCR with ET primers and microfabricated radial CAE microplates to perform multiplex SNP analyses in a clinically relevant population. PMID:11230165
Jacobson, Stephen C.; Ramsey, J. Michael
2000-01-01
A microfabricated device and method for proportioning and mixing electrokinetically manipulated biological or chemical materials is disclosed. The microfabricated device mixes a plurality of materials in volumetric proportions controlled by the electrical resistances of tributary reagent channels through which the materials are transported. The microchip includes two or more tributary reagent channels combining at one or more junctions to form one or more mixing channels. By varying the geometries of the channels (length, cross section, etc.), a plurality of reagent materials can be mixed at a junction such that the proportions of the reagent materials in the mixing channel depend on a ratio of the channel geometries and material properties. Such an approach facilitates voltage division on the microchip without relying on external wiring schemes and voltage division techniques external to the microchip. Microchannel designs that provide the necessary voltage division to accomplish electrokinetic valving operations using a single voltage source and a switch are also described. In addition, microchannel designs that accomplish fluidic operation utilizing a minimal number of fluidic reservoirs are disclosed.
Jacobson, Stephen C [Knoxville, TN; Ramsey, J Michael [Knoxville, TN
2001-01-01
A microfabricated device and method for proportioning and mixing biological or chemical materials by pressure- or vacuum-driven flow is disclosed. The microfabricated device mixes a plurality of materials in volumetric proportions controlled by the flow resistances of tributary reagent channels through which the materials are transported. The microchip includes two or more tributary reagent channels combining at one or more junctions to form one or more mixing channels. By varying the geometries of the channels (length, cross section, etc.), a plurality of reagent materials can be mixed at a junction such that the proportions of the reagent materials in the mixing channel depend on a ratio of the channel geometries and material properties. Such an approach facilitates flow division on the microchip without relying on techniques external to the microchip. Microchannel designs that provide the necessary flow division to accomplish valving operations using a minimum of pressure or vacuum sources are also described. In addition, microchannel designs that accomplish fluidic operation utilizing a minimal number of fluidic reservoirs are disclosed.
NASA Astrophysics Data System (ADS)
Saleem, Amin M.; Andersson, Rickard; Desmaris, Vincent; Enoksson, Peter
2018-01-01
Complete miniaturized on-chip integrated solid-state capacitors have been fabricated based on conformal coating of vertically aligned carbon nanofibers (VACNFs), using a CMOS temperature compatible microfabrication processes. The 5 μm long VACNFs, operating as electrode, are grown on a silicon substrate and conformally coated by aluminum oxide dielectric using atomic layer deposition (ALD) technique. The areal (footprint) capacitance density value of 11-15 nF/mm2 is realized with high reproducibility. The CMOS temperature compatible microfabrication, ultra-low profile (less than 7 μm thickness) and high capacitance density would enables direct integration of micro energy storage devices on the active CMOS chip, multi-chip package and passives on silicon or glass interposer. A model is developed to calculate the surface area of VACNFs and the effective capacitance from the devices. It is thereby shown that 71% of surface area of the VACNFs has contributed to the measured capacitance, and by using the entire area the capacitance can potentially be increased.
Microfabrication of microchannels for fuel cell plates.
Jang, Ho Su; Park, Dong Sam
2010-01-01
Portable electronic devices such as notebook computers, PDAs, cellular phones, etc., are being widely used, and they increasingly need cheap, efficient, and lightweight power sources. Fuel cells have been proposed as possible power sources to address issues that involve energy production and the environment. In particular, a small type of fuel-cell system is known to be suitable for portable electronic devices. The development of micro fuel cell systems can be achieved by the application of microchannel technology. In this study, the conventional method of chemical etching and the mechanical machining method of micro end milling were used for the microfabrication of microchannel for fuel cell separators. The two methods were compared in terms of their performance in the fabrication with regards to dimensional errors, flatness, straightness, and surface roughness. Following microchannel fabrication, the powder blasting technique is introduced to improve the coating performance of the catalyst on the surface of the microchannel. Experimental results show that end milling can remarkably increase the fabrication performance and that surface treatment by powder blasting can improve the performance of catalyst coating.
Microfabrication of Microchannels for Fuel Cell Plates
Jang, Ho Su; Park, Dong Sam
2010-01-01
Portable electronic devices such as notebook computers, PDAs, cellular phones, etc., are being widely used, and they increasingly need cheap, efficient, and lightweight power sources. Fuel cells have been proposed as possible power sources to address issues that involve energy production and the environment. In particular, a small type of fuel-cell system is known to be suitable for portable electronic devices. The development of micro fuel cell systems can be achieved by the application of microchannel technology. In this study, the conventional method of chemical etching and the mechanical machining method of micro end milling were used for the microfabrication of microchannel for fuel cell separators. The two methods were compared in terms of their performance in the fabrication with regards to dimensional errors, flatness, straightness, and surface roughness. Following microchannel fabrication, the powder blasting technique is introduced to improve the coating performance of the catalyst on the surface of the microchannel. Experimental results show that end milling can remarkably increase the fabrication performance and that surface treatment by powder blasting can improve the performance of catalyst coating. PMID:22315533
Experimental Characterization of Microfabricated VirtualImpactor Efficiency
The Air-Microfluidics Group is developing a microelectromechanical systems-based direct reading particulate matter (PM) mass sensor. The sensor consists of two main components: a microfabricated virtual impactor (VI) and a PM mass sensor. The VI leverages particle inertia to sepa...
Microfabricated AC impedance sensor
Krulevitch, Peter; Ackler, Harold D.; Becker, Frederick; Boser, Bernhard E.; Eldredge, Adam B.; Fuller, Christopher K.; Gascoyne, Peter R. C.; Hamilton, Julie K.; Swierkowski, Stefan P.; Wang, Xiao-Bo
2002-01-01
A microfabricated instrument for detecting and identifying cells and other particles based on alternating current (AC) impedance measurements. The microfabricated AC impedance sensor includes two critical elements: 1) a microfluidic chip, preferably of glass substrates, having at least one microchannel therein and with electrodes patterned on both substrates, and 2) electrical circuits that connect to the electrodes on the microfluidic chip and detect signals associated with particles traveling down the microchannels. These circuits enable multiple AC impedance measurements of individual particles at high throughput rates with sufficient resolution to identify different particle and cell types as appropriate for environmental detection and clinical diagnostic applications.
Ma, Xinyu; Feng, Shuxuan; He, Liang; Yan, Mengyu; Tian, Xiaocong; Li, Yanxi; Tang, Chunjuan; Hong, Xufeng; Mai, Liqiang
2017-08-17
On-chip electrochemical energy storage devices have attracted growing attention due to the decreasing size of electronic devices. Various approaches have been applied for constructing the microsupercapacitors. However, the microfabrication of high-performance microsupercapacitors by conventional and fully compatible semiconductor microfabrication technologies is still a critical challenge. Herein, unique three-dimensional (3D) Co 3 O 4 nanonetwork microelectrodes formed by the interconnection of Co 3 O 4 nanosheets are constructed by controllable physical vapor deposition combined with rapid thermal annealing. This construction process is an all dry and rapid (≤5 minutes) procedure. Afterward, by sputtering highly electrically conductive Pt nanoparticles on the microelectrodes, the 3D Co 3 O 4 /Pt nanonetworks based microsupercapacitor is fabricated, showing a high volume capacitance (35.7 F cm -3 ) at a scan rate of 20 mV s -1 due to the unique interconnected structures, high electrical conductivity and high surface area of the microelectrodes. This microfabrication process is also used to construct high-performance flexible microsupercapacitors, and it can be applied in the construction of wearable devices. The proposed strategy is completely compatible with the current semiconductor microfabrication and shows great potential in the applications of the large-scale integration of micro/nano and wearable devices.
Live-cell mass profiling: an emerging approach in quantitative biophysics.
Zangle, Thomas A; Teitell, Michael A
2014-12-01
Cell mass, volume and growth rate are tightly controlled biophysical parameters in cellular development and homeostasis, and pathological cell growth defines cancer in metazoans. The first measurements of cell mass were made in the 1950s, but only recently have advances in computer science and microfabrication spurred the rapid development of precision mass-quantifying approaches. Here we discuss available techniques for quantifying the mass of single live cells with an emphasis on relative features, capabilities and drawbacks for different applications.
Microengineering hydrogels for stem cell bioengineering and tissue regeneration.
Wheeldon, Ian; Ahari, Amirhossein F; Khademhosseini, Ali
2010-12-01
The integration of microfabrication technologies with advanced biomaterials has led to the development of powerful tools to control the cellular microenvironment and the microarchitecture of engineered tissue constructs. Here we review this area, with a focus on the work accomplished in our laboratory. In particular, we discuss techniques to develop hydrogel microstructures for controlling cell aggregate formation to regulate stem cell behavior as well as a bottom-up and a top-down microengineering approach to creating biomimic tissue-like structures.
Microengineering hydrogels for stem cell bioengineering and tissue regeneration
Wheeldon, Ian; Ahari, Amirhossein F.; Khademhosseini, Ali
2010-01-01
The integration of microfabrication technologies with advanced biomaterials has led to the development of powerful tools to control the cellular microenvironment and the microarchitecture of engineered tissue constructs. Here we review this area, with a focus on the work accomplished in our laboratory. In particular, we discuss techniques to develop hydrogel microstructures for controlling cell aggregate formation to regulate stem cell behavior as well as a bottom-up and a top-down microengineering approach to creating biomimic tissue-like structures. PMID:21344063
Process For Patterning Dispenser-Cathode Surfaces
NASA Technical Reports Server (NTRS)
Garner, Charles E.; Deininger, William D.
1989-01-01
Several microfabrication techniques combined into process cutting slots 100 micrometer long and 1 to 5 micrometer wide into tungsten dispenser cathodes for traveling-wave tubes. Patterned photoresist serves as mask for etching underlying aluminum. Chemically-assisted ion-beam etching with chlorine removes exposed parts of aluminum layer. Etching with fluorine or chlorine trifluoride removes tungsten not masked by aluminum layer. Slots enable more-uniform low-work function coating dispensed to electron-emitting surface. Emission of electrons therefore becomes more uniform over cathode surface.
Laser etching of groove structures with micro-optical fiber-enhanced irradiation
2012-01-01
A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field intensity enhancement at the contact area between the fiber and the surface during the laser irradiation, simulation results are also presented, which agree well with the experimental results. PMID:22713521
Lateral electrochemical etching of III-nitride materials for microfabrication
DOE Office of Scientific and Technical Information (OSTI.GOV)
Han, Jung
Conductivity-selective lateral etching of III-nitride materials is described. Methods and structures for making vertical cavity surface emitting lasers with distributed Bragg reflectors via electrochemical etching are described. Layer-selective, lateral electrochemical etching of multi-layer stacks is employed to form semiconductor/air DBR structures adjacent active multiple quantum well regions of the lasers. The electrochemical etching techniques are suitable for high-volume production of lasers and other III-nitride devices, such as lasers, HEMT transistors, power transistors, MEMs structures, and LEDs.
An Easy to Manufacture Micro Gas Preconcentrator for Chemical Sensing Applications.
McCartney, Mitchell M; Zrodnikov, Yuriy; Fung, Alexander G; LeVasseur, Michael K; Pedersen, Josephine M; Zamuruyev, Konstantin O; Aksenov, Alexander A; Kenyon, Nicholas J; Davis, Cristina E
2017-08-25
We have developed a simple-to-manufacture microfabricated gas preconcentrator for MEMS-based chemical sensing applications. Cavities and microfluidic channels were created using a wet etch process with hydrofluoric acid, portions of which can be performed outside of a cleanroom, instead of the more common deep reactive ion etch process. The integrated heater and resistance temperature detectors (RTDs) were created with a photolithography-free technique enabled by laser etching. With only 28 V DC (0.1 A), a maximum heating rate of 17.6 °C/s was observed. Adsorption and desorption flow parameters were optimized to be 90 SCCM and 25 SCCM, respectively, for a multicomponent gas mixture. Under testing conditions using Tenax TA sorbent, the device was capable of measuring analytes down to 22 ppb with only a 2 min sample loading time using a gas chromatograph with a flame ionization detector. Two separate devices were compared by measuring the same chemical mixture; both devices yielded similar peak areas and widths (fwhm: 0.032-0.033 min), suggesting reproducibility between devices.
Line spread functions of blazed off-plane gratings operated in the Littrow mounting
NASA Astrophysics Data System (ADS)
DeRoo, Casey T.; McEntaffer, Randall L.; Miles, Drew M.; Peterson, Thomas J.; Marlowe, Hannah; Tutt, James H.; Donovan, Benjamin D.; Menz, Benedikt; Burwitz, Vadim; Hartner, Gisela; Allured, Ryan; Smith, Randall K.; Günther, Ramses; Yanson, Alex; Vacanti, Giuseppe; Ackermann, Marcelo
2016-04-01
Future soft x-ray (10 to 50 Å) spectroscopy missions require higher effective areas and resolutions to perform critical science that cannot be done by instruments on current missions. An x-ray grating spectrometer employing off-plane reflection gratings would be capable of meeting these performance criteria. Off-plane gratings with blazed groove facets operating in the Littrow mounting can be used to achieve excellent throughput into orders achieving high resolutions. We have fabricated two off-plane gratings with blazed groove profiles via a technique that uses commonly available microfabrication processes, is easily scaled for mass production, and yields gratings customized for a given mission architecture. Both fabricated gratings were tested in the Littrow mounting at the Max Planck Institute for Extraterrestrial Physics (MPE) PANTER x-ray test facility to assess their performance. The line spread functions of diffracted orders were measured, and a maximum resolution of 800±20 is reported. In addition, we also observe evidence of a blaze effect from measurements of relative efficiencies of the diffracted orders.
Off-plane x-ray reflection grating fabrication
NASA Astrophysics Data System (ADS)
Peterson, Thomas J.; DeRoo, Casey T.; Marlowe, Hannah; McEntaffer, Randall L.; Miles, Drew M.; Tutt, James H.; Schultz, Ted B.
2015-09-01
Off-plane X-ray diffraction gratings with precision groove profiles at the submicron scale will be used in next generation X-ray spectrometers. Such gratings will be used on a current NASA suborbital rocket mission, the Off-plane Grating Rocket Experiment (OGRE), and have application for future grating missions. The fabrication of these gratings does not come without challenges. High performance off-plane gratings must be fabricated with precise radial grating patterns, optically at surfaces, and specific facet angles. Such gratings can be made using a series of common micro-fabrication techniques. The resulting process is highly customizable, making it useful for a variety of different mission architectures. In this paper, we detail the fabrication method used to produce high performance off-plane gratings and report the results of a preliminary qualification test of a grating fabricated in this manner. The grating was tested in the off-plane `Littrow' configuration, for which the grating is most efficient for a given diffraction order, and found to achieve 42% relative efficiency in the blaze order with respect to all diffracted light.
Engineers are from PDMS-land, Biologists are from Polystyrenia.
Berthier, Erwin; Young, Edmond W K; Beebe, David
2012-04-07
As the integration of microfluidics into cell biology research proceeds at an ever-increasing pace, a critical question for those working at the interface of both disciplines is which device material to use for a given application. While PDMS and soft lithography methods offer the engineer rapid prototyping capabilities, PDMS as a material has characteristics that have known adverse effects on cell-based experiments. In contrast, while polystyrene (PS), the most commonly used thermoplastic for laboratory cultureware, has provided decades of grounded and validated research conclusions in cell behavior and function, PS as a material has posed significant challenges in microfabrication. These competing issues have forced microfluidics engineers and biologists to make compromises in how they approach specific research questions, and furthermore, have attenuated the impact of microfluidics on biological research. In this review, we provide a comparison of the attributes of PDMS and PS, and discuss reasons for their popularity in their respective fields. We provide a critical evaluation of the strengths and limitations of PDMS and PS in relation to the advancement and future impact on microfluidic cell-based studies and applications. We believe that engineers have a responsibility to overcome any challenges associated with microfabrication, whether with PS or other materials, and that engineers should provide options and solutions that assist biologists in their experimental design. Our goal is not to advocate for any specific material, but provide guidelines for researchers who desire to choose the most suitable material for their application, and suggest important research directions for engineers working at the interface between microfabrication technology and biological application. This journal is © The Royal Society of Chemistry 2012
Chau, S W; Hsu, K L; Chen, S C; Liou, T M; Shih, K C
2004-07-30
The droplet impingement into a cavity at micrometer-scale is one of important fluidic issues for microfabrications, e.g. the inkjet deposition process in the PLED display manufacturing. The related micro-fluidic behaviors in the deposition process should be carefully treated to ensure the desired quality of microfabrication. The droplets generally dispensing from an inkjet head, which contains an array of nozzles, have a volume in several picoliters, while each nozzle responds very quickly and jets the droplets into cavities on substrates with micrometer size. The nature of droplet impingement depends on the fluid properties, the initial state of droplet, the impact parameters and the surface characteristics. The commonly chosen non-dimensional numbers to describe this process are the Weber number, the Reynolds number, the Ohnesorge number, and the Bond number. This paper discusses the influences of fluid properties of a Newtonian fluid, such as surface tension and fluid viscosity, on micro-fluidic characteristics for a certain jetting speed in the deposition process via a numerical approach, which indicates the impingement process consists of four different phases. In the first phase, the droplet stretching outwards rapidly, where inertia force is dominated. In the second phase, the recoiling of droplet is observed, where surface tension becomes the most important force. In the third phase, the gravitational force pulls the droplet surface towards cavity walls. The fourth phase begins when the droplet surface touches cavity walls and ends when the droplet obtains a stable shape. If the fluid viscosity is relatively small, the droplet surface touches cavity walls in the second phase. A stable fluid layer would not form if the viscosity is relatively small.
Microfabricated Chemical Sensors for Safety and Emission Control Applications
NASA Technical Reports Server (NTRS)
Hunter, G. W.; Neudeck, P. G.; Chen, L.-Y.; Knight, D.; Liu, C. C.; Wu, Q. H.
1998-01-01
Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication (MicroElectroMechanical Systems (MEMS)-based) technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.
Tian, CaiYan; Yin, JinWei; Zhao, ZhongJun; Zhang, Yinchenxi; Duan, YiXiang
2017-05-15
A novel technique of micro-fabricated glow discharge plasma desorption/ionization mass spectrometry was investigated for the first time in negative ion mode in this study. Negative ion micro-fabricated glow discharge plasma desorption/ionization mass spectrometry (NI-MFGDP-MS) was successfully applied to identify trace explosives in open air. Six explosives and explosives-related compounds were directly analyzed in seconds with this ion source. The ions of [M-H] - were predominant for 2-methyl-1,3,5-trinitrobenzene (trinitrotoluene, TNT) and 2,4,6-trinitrophenol (picric acid), and [M+NO 3 ] - were dominant ions for 1,3,5-trinitro-perhydro-1,3,5-triazine (cyclonite, RDX), octahydro-1,3,5,7-tetranitro-1,3,5,7-tetrazocine (octogen, HMX), 1,2,3-trinitroxypropane (nitroglycerin, NG), and pentaerythritol tetranitrate (PETN). The limits of detection (LOD) were from 87.5pgmm -2 to 0.4 fg mm -2 and the relative standard deviation (RSD) ranged between 5.8% and 16.8% for the explosives involved in this study. The reliability of NI-MFGDP-MS was characterized by the analysis of a picric acid-RDX-PETN mixture and a mixture of RDX-pond water. NI-MFGDP-MS and ESI-MS were compared with these explosives and along with collision induced dissociation (CID) experiments. The results showed that electron capture, proton abstraction reaction, nucleophilic attack, ion-molecule attachment, decomposition and anion attachment took place during the NI-MFGDP-MS measurement. These findings provide a guideline and a supplement to the chemical libraries for rapid and accurate detection of explosives. The method shows great potential for fast, in situ, on-line and high throughput detection of explosives in the field of antiterrorism. Copyright © 2017 Elsevier B.V. All rights reserved.
Mathies, Richard A.; Singhal, Pankaj; Xie, Jin; Glazer, Alexander N.
2002-01-01
This invention relates to a microfabricated capillary electrophoresis chip for detecting multiple redox-active labels simultaneously using a matrix coding scheme and to a method of selectively labeling analytes for simultaneous electrochemical detection of multiple label-analyte conjugates after electrophoretic or chromatographic separation.
High-fidelity operations in microfabricated surface ion traps
NASA Astrophysics Data System (ADS)
Maunz, Peter
2017-04-01
Trapped ion systems can be used to implement quantum computation as well as quantum simulation. To scale these systems to the number of qubits required to solve interesting problems in quantum chemistry or solid state physics, the use of large multi-zone ion traps has been proposed. Microfabrication enables the realization of surface electrode ion traps with complex electrode structures. While these traps may enable the scaling of trapped ion quantum information processing (QIP), microfabricated ion traps also pose several technical challenges. Here, we present Sandia's trap fabrication capabilities and characterize trap properties and shuttling operations in our most recent high optical access trap (HOA-2). To demonstrate the viability of Sandia's microfabricated ion traps for QIP we realize robust single and two-qubit gates and characterize them using gate set tomography (GST). In this way we are able to demonstrate the first single qubit gates with a diamond norm of less than 1 . 7 ×10-4 , below a rigorous fault tolerance threshold for general noise of 6 . 7 ×10-4. Furthermore, we realize Mølmer-Sørensen two qubit gates with a process fidelity of 99 . 58(6) % also characterized by GST. These results demonstrate the viability of microfabricated surface traps for state of the art quantum information processing demonstrations. This research was funded, in part, by the Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity (IARPA).
AC electrothermal technique in microchannels
NASA Astrophysics Data System (ADS)
Salari, Alinaghi; Navi, Maryam; Dalton, Colin
2017-02-01
Electrokinetic techniques have a wide range of applications in droplet, particle, and fluid manipulation systems. In general, they can be categorized into different subgroups including electroosmosis, electrothermal, electrophoresis, dielectrophoresis, etc. The AC electrothermal (ACET) technique has been shown to be very effective in applications which involve high conductivity fluids, such as blood, which are typically used in biomedical applications. In the past few years, the ACET effect has received considerable attention. Unlike AC electroosmosis (ACEO), the ACET effect shows plateaus in force in a wide frequency range. In other words, with electrothermal force, velocity is more steady and predictable at different frequencies, compared to ACEO and dielectrophoresis (DEP). Although electrothermal microflows form as a result of Joule heating in the fluid, due to high conduction of heat to the ambience, the temperature rise in the fluid is not so high as to threaten the nature of the biofluids. The average temperature rise resulting from the ACET effect is below 5 °K. In order to generate high strength AC electric fields, microfabricated electrode arrays are commonly used in microchannels. For pumping applications, it is essential to create asymmetry in the electric field, typically by having asymmetrical electrode pairs. There is no defined border between many electrokinetic techniques, and as such the point where electrothermal processes interferes with other electrokinetic techniques is not clear in the literature. In addition, there have been comprehensive reviews on micropumps, electrokinetics, and their subcategories, but the literature lacks a detailed up-to-date review on electrothermal microdevices. In this paper, a brief review is made specifically on electric fields in ACET devices, in order to provide an insight for the reader about the importance of this aspect of ACET devices and the improvements made to date.
MICROFABRICATED ELECTROCHEMICAL ANALYSIS SYSTEM FOR HEAVY METAL DETECTION. (R825511C047)
A low power, hand-held system has been developed for the measurement of heavy metal ions in aqueous solutions. The system consists of an electrode array sensor, a high performance single chip potentiostat and a microcontroller circuit. The sensor is a microfabricated array of ...
Current driven dynamics of magnetic domain walls in permalloy nanowires
NASA Astrophysics Data System (ADS)
Hayashi, Masamitsu
The significant advances in micro-fabrication techniques opened the door to access interesting properties in solid state physics. With regard to magnetic materials, geometrical confinement of magnetic structures alters the defining parameters that govern magnetism. For example, development of single domain nano-pillars made from magnetic multilayers led to the discovery of electrical current controlled magnetization switching, which revealed the existence of spin transfer torque. Magnetic domain walls (DWs) are boundaries in magnetic materials that divide regions with distinct magnetization directions. DWs play an important role in the magnetization reversal processes of both bulk and thin film magnetic materials. The motion of DW is conventionally controlled by magnetic fields. Recently, it has been proposed that spin polarized current passed across the DW can also control the motion of DWs. Current in most magnetic materials is spin-polarized, due to spin-dependent scattering of the electrons, and thus can deliver spin angular momentum to the DW, providing a "spin transfer" torque on the DW which leads to DW motion. In addition, owing to the development of micro-fabrication techniques, geometrical confinement of magnetic materials enables creation and manipulation of a "single" DW in magnetic nanostructures. New paradigms for DW-based devices are made possible by the direct manipulation of DWs using spin polarized electrical current via spin transfer torque. This dissertation covers research on current induced DW motion in magnetic nanowires. Fascinating effects arising from the interplay between DWs with spin polarized current will be revealed.
Pai, Rekha S; Walsh, Kevin M; Crain, Mark M; Roussel, Thomas J; Jackson, Douglas J; Baldwin, Richard P; Keynton, Robert S; Naber, John F
2009-06-15
A scalable and rather inexpensive solution to producing microanalytical systems with "on-chip" three-dimensional (3D) microelectrodes is presented in this study, along with applicability to practical electrochemical (EC) detection scenarios such as preconcentration and interferant removal. This technique to create high-aspect-ratio (as much as 4:1) gold microstructures in constrained areas involved the modification of stud bump geometry with microfabricated silicon molds via an optimized combination of temperature, pressure, and time. The microelectrodes that resulted consisted of an array of square pillars approximately 18 microm tall and 20 microm wide on each side, placed at the end of a microfabricated electrophoresis channel. This technique increased the active surface area of the microelectrodes by as much as a factor of 50, while mass transfer and, consequently, preconcentration collection efficiencies were increased to approximately 100%, compared to approximately 30% efficiency for planar nonmodified microelectrodes (samples that were used included the neurotransmitters dopamine and catechol). The 3D microelectrodes were used both in a stand-alone configuration, for direct EC detection of model catecholamine analytes, and, more interestingly, in dual electrode configurations for EC sample processing prior to detection downstream at a second planar electrode. In particular, the 3D electrodes were shown to be capable of performing coulometry or complete (100%) redox conversion of analyte species over a wide range of concentrations, from 4.3 microM to 4.4 mM, in either plug-flow or continuous-flow formats.
Hermansen, Peter; MacKay, Scott; Wishart, David; Jie Chen
2016-08-01
Microfabricated interdigitated electrode chips have been designed for use in a unique gold-nanoparticle based biosensor system. The use of these electrodes will allow for simple, accurate, inexpensive, and portable biosensing, with potential applications in diagnostics, medical research, and environmental testing. To determine the optimal design for these electrodes, finite element analysis simulations were carried out using COMSOL Multiphysics software. The results of these simulations determined some of the optimal design parameters for microfabricating interdigitated electrodes as well as predicting the effects of different electrode materials. Finally, based on the results of these simulations two different kinds of interdigitated electrode chips were made using photolithography.
Microfabricated particle focusing device
Ravula, Surendra K.; Arrington, Christian L.; Sigman, Jennifer K.; Branch, Darren W.; Brener, Igal; Clem, Paul G.; James, Conrad D.; Hill, Martyn; Boltryk, Rosemary June
2013-04-23
A microfabricated particle focusing device comprises an acoustic portion to preconcentrate particles over large spatial dimensions into particle streams and a dielectrophoretic portion for finer particle focusing into single-file columns. The device can be used for high throughput assays for which it is necessary to isolate and investigate small bundles of particles and single particles.
Multi-photon microfabrication of three-dimensional capillary-scale vascular networks
NASA Astrophysics Data System (ADS)
Skylar-Scott, Mark A.; Liu, Man-Chi; Wu, Yuelong; Yanik, Mehmet Fatih
2017-02-01
Biomimetic models of microvasculature could enable assays of complex cellular behavior at the capillary-level, and enable efficient nutrient perfusion for the maintenance of tissues. However, existing three-dimensional printing methods for generating perfusable microvasculature with have insufficient resolution to recapitulate the microscale geometry of capillaries. Here, we present a collection of multiphoton microfabrication methods that enable the production of precise, three-dimensional, branched microvascular networks in collagen. When endothelial cells are added to the channels, they form perfusable lumens with diameters as small as 10 μm. Using a similar photochemistry, we also demonstrate the micropatterning of proteins embedded in microfabricated collagen scaffolds, producing hybrid scaffolds with both defined microarchitecture with integrated gradients of chemical cues. We provide examples for how these hybrid microfabricated scaffolds could be used in angiogenesis and cell homing assays. Finally, we describe a new method for increasing the micropatterning speed by synchronous laser and stage scanning. Using these technologies, we are working towards large-scale (>1 cm), high resolution ( 1 μm) scaffolds with both microarchitecture and embedded protein cues, with applications in three-dimensional assays of cellular behavior.
Evaluation of microfabricated deformable mirror systems
NASA Astrophysics Data System (ADS)
Cowan, William D.; Lee, Max K.; Bright, Victor M.; Welsh, Byron M.
1998-09-01
This paper presents recent result for aberration correction and beam steering experiments using polysilicon surface micromachined piston micromirror arrays. Microfabricated deformable mirrors offer a substantial cost reduction for adaptive optic systems. In addition to the reduced mirror cost, microfabricated mirrors typically require low control voltages, thus eliminating high voltage amplifiers. The greatly reduced cost per channel of adaptive optic systems employing microfabricated deformable mirrors promise high order aberration correction at low cost. Arrays of piston micromirrors with 128 active elements were tested. Mirror elements are on a 203 micrometers 12 by 12 square grid. The overall array size is 2.4 mm square. The arrays were fabricated in the commercially available DARPA supported MUMPs surface micromachining foundry process. The cost per mirror array in this prototyping process is less than 200 dollars. Experimental results are presented for a hybrid correcting element comprised of a lenslet array and piston micromirror array, and for a piston micromirror array only. Also presented is a novel digital deflection micromirror which requires no digital to analog converters, further reducing the cost of adaptive optics system.
Integrative Bioengineering Institute
DOE Office of Scientific and Technical Information (OSTI.GOV)
Eddington, David; Magin,L,Richard; Hetling, John
2009-01-09
Microfabrication enables many exciting experimental possibilities for medicine and biology that are not attainable through traditional methods. However, in order for microfabricated devices to have an impact they must not only provide a robust solution to a current unmet need, but also be simple enough to seamlessly integrate into standard protocols. Broad dissemination of bioMEMS has been stymied by the common aim of replacing established and well accepted protocols with equally or more complex devices, methods, or materials. The marriage of a complex, difficult to fabricate bioMEMS device with a highly variable biological system is rarely successful. Instead, the designmore » philosophy of my lab aims to leverage a beneficial microscale phenomena (e.g. fast diffusion at the microscale) within a bioMEMS device and adapt to established methods (e.g. multiwell plate cell culture) and demonstrate a new paradigm for the field (adapt instead of replace). In order for the field of bioMEMS to mature beyond novel proof-of-concept demonstrations, researchers must focus on developing systems leveraging these phenomena and integrating into standard labs, which have largely been ignored. Towards this aim, the Integrative Bioengineering Institute has been established.« less
Development of lead zirconate titanate cantilevers on the micrometer length scale
NASA Astrophysics Data System (ADS)
Martin, Christopher Robert
The objective of this research project was to fabricate a functional ferroelectric microcantilever from patterned lead zirconate titanate (PZT) thin films. Cantilevers fabricated from ferroelectric materials have tremendous potential in sensing applications, particularly due to the increased sensitivity that miniaturized devices offer. This thesis highlights and explores a number of the processing issues that hindered the production of a working prototype. PZT is patterned using soft lithography-inspired techniques from a PZT chemical precursor solution derived by the chelation synthesis route. As the ability to pattern ceramic materials derived from sol-gels on the micrometer scale is a relatively new technology, this thesis aims to expand the scientific understanding of new issues that arise when working with these patterned films. For example, the use of Micromolding in Capillaries (MIMIC) to pattern the PZT thin films results in the evolution of topographical distortions from the shape of the original mold during the shrinkage of patterned thin film during drying and sintering. The factors that contribute to this effect have been explained and a new processing technique called MicroChannel Molding (muCM) was developed. This new process combines the advantages of soft lithography with traditional silicon microfabrication techniques to ensure compatibility with current industrial practices. This work lays the foundation for the future production of working ferroelectric microcantilevers. The proposed microfabrication process is described along with descriptions of each processing difficulty that was encountered. Modifications to the process are proposed along with the descriptions of alternative processing techniques that were attempted for the benefit of future researchers. This dissertation concludes with the electronic characterization of micropattemed PZT thin films. To our knowledge, the ferroelectric properties of patterned PZT thin films have never been directly characterized before. The properties are measured with a commercial ferroelectric test system connected through a conductive Atomic Force Microscope tip. The films patterned by MIMIC and muCM are compared to large-area spin cast films to identify the role that the processing method has on the resulting properties.
Electrospinning for nano- to mesoscale photonic structures
NASA Astrophysics Data System (ADS)
Skinner, Jack L.; Andriolo, Jessica M.; Murphy, John P.; Ross, Brandon M.
2017-08-01
The fabrication of photonic and electronic structures and devices has directed the manufacturing industry for the last 50 years. Currently, the majority of small-scale photonic devices are created by traditional microfabrication techniques that create features by processes such as lithography and electron or ion beam direct writing. Microfabrication techniques are often expensive and slow. In contrast, the use of electrospinning (ES) in the fabrication of micro- and nano-scale devices for the manipulation of photons and electrons provides a relatively simple and economic viable alternative. ES involves the delivery of a polymer solution to a capillary held at a high voltage relative to the fiber deposition surface. Electrostatic force developed between the collection plate and the polymer promotes fiber deposition onto the collection plate. Issues with ES fabrication exist primarily due to an instability region that exists between the capillary and collection plate and is characterized by chaotic motion of the depositing polymer fiber. Material limitations to ES also exist; not all polymers of interest are amenable to the ES process due to process dependencies on molecular weight and chain entanglement or incompatibility with other polymers and overall process compatibility. Passive and active electronic and photonic fibers fabricated through the ES have great potential for use in light generation and collection in optical and electronic structures/devices. ES produces fiber devices that can be combined with inorganic, metallic, biological, or organic materials for novel device design. Synergistic material selection and post-processing techniques are also utilized for broad-ranging applications of organic nanofibers that span from biological to electronic, photovoltaic, or photonic. As the ability to electrospin optically and/or electronically active materials in a controlled manner continues to improve, the complexity and diversity of devices fabricated from this process can be expected to grow rapidly and provide an alternative to traditional resource-intensive fabrication techniques.
New Deep Reactive Ion Etching Process Developed for the Microfabrication of Silicon Carbide
NASA Technical Reports Server (NTRS)
Evans, Laura J.; Beheim, Glenn M.
2005-01-01
Silicon carbide (SiC) is a promising material for harsh environment sensors and electronics because it can enable such devices to withstand high temperatures and corrosive environments. Microfabrication techniques have been studied extensively in an effort to obtain the same flexibility of machining SiC that is possible for the fabrication of silicon devices. Bulk micromachining using deep reactive ion etching (DRIE) is attractive because it allows the fabrication of microstructures with high aspect ratios (etch depth divided by lateral feature size) in single-crystal or polycrystalline wafers. Previously, the Sensors and Electronics Branch of the NASA Glenn Research Center developed a DRIE process for SiC using the etchant gases sulfur hexafluoride (SF6) and argon (Ar). This process provides an adequate etch rate of 0.2 m/min and yields a smooth surface at the etch bottom. However, the etch sidewalls are rougher than desired, as shown in the preceding photomicrograph. Furthermore, the resulting structures have sides that slope inwards, rather than being precisely vertical. A new DRIE process for SiC was developed at Glenn that produces smooth, vertical sidewalls, while maintaining an adequately high etch rate.
Microfabricated Ion Beam Drivers for Magnetized Target Fusion
NASA Astrophysics Data System (ADS)
Persaud, Arun; Seidl, Peter; Ji, Qing; Ardanuc, Serhan; Miller, Joseph; Lal, Amit; Schenkel, Thomas
2015-11-01
Efficient, low-cost drivers are important for Magnetized Target Fusion (MTF). Ion beams offer a high degree of control to deliver the required mega joules of driver energy for MTF and they can be matched to several types of magnetized fuel targets, including compact toroids and solid targets. We describe an ion beam driver approach based on the MEQALAC concept (Multiple Electrostatic Quadrupole Array Linear Accelerator) with many beamlets in an array of micro-fabricated channels. The channels consist of a lattice of electrostatic quadrupoles (ESQ) for focusing and of radio-frequency (RF) electrodes for ion acceleration. Simulations with particle-in-cell and beam envelope codes predict >10x higher current densities compared to state-of-the-art ion accelerators. This increase results from dividing the total ion beam current up into many beamlets to control space charge forces. Focusing elements can be biased taking advantage of high breakdown electric fields in sub-mm structures formed using MEMS techniques (Micro-Electro-Mechanical Systems). We will present results on ion beam transport and acceleration in MEMS based beamlets. Acknowledgments: This work is supported by the U.S. DOE under Contract No. DE-AC02-05CH11231.
NASA Astrophysics Data System (ADS)
Lin, Yuehe; Wen, Jenny; Fan, Xiang; Matson, Dean W.; Smith, Richard D.
1999-08-01
A microfabricated device for isoelectric focusing (IEF) incorporating an optimized electrospray ionization (ESI) tip was constructed on polycarbonate plates using a laser micromachining technique. The separation channels on an IEF chip were 16 cm long, 50 micrometers wide and 30 micrometers deep. Electrical potentials used for IEF focusing and electrospray were applied through platinum electrodes placed in the buffer reservoirs, and which were isolated from the separation channel by molecular porous membranes. On-line ESI produced directly from a sharp `tip' on the microchip was evaluated. The results indicate that this design can produce a stable electrospray that is further improved and made more flexible with the assistance of sheath gas and sheath liquid. Error analysis of the spectral data shows that the standard deviation in signal intensity for an analyte peak was less than approximately 5% over 3 hours. The production of stable electrosprays directly from microchip IEF devices represents a step towards easily- fabricated microanalytical devices. IEF separations of protein mixtures were demonstrated for uncoated polycarbonate microchips. On-line IEF/ESI-MS was demonstrated using the microfabricated chip with an ion-trap ESI mass spectrometer for characterization of protein mixtures.
Advances in miniature spectrometer and sensor development
NASA Astrophysics Data System (ADS)
Malinen, Jouko; Rissanen, Anna; Saari, Heikki; Karioja, Pentti; Karppinen, Mikko; Aalto, Timo; Tukkiniemi, Kari
2014-05-01
Miniaturization and cost reduction of spectrometer and sensor technologies has great potential to open up new applications areas and business opportunities for analytical technology in hand held, mobile and on-line applications. Advances in microfabrication have resulted in high-performance MEMS and MOEMS devices for spectrometer applications. Many other enabling technologies are useful for miniature analytical solutions, such as silicon photonics, nanoimprint lithography (NIL), system-on-chip, system-on-package techniques for integration of electronics and photonics, 3D printing, powerful embedded computing platforms, networked solutions as well as advances in chemometrics modeling. This paper will summarize recent work on spectrometer and sensor miniaturization at VTT Technical Research Centre of Finland. Fabry-Perot interferometer (FPI) tunable filter technology has been developed in two technical versions: Piezoactuated FPIs have been applied in miniature hyperspectral imaging needs in light weight UAV and nanosatellite applications, chemical imaging as well as medical applications. Microfabricated MOEMS FPIs have been developed as cost-effective sensor platforms for visible, NIR and IR applications. Further examples of sensor miniaturization will be discussed, including system-on-package sensor head for mid-IR gas analyzer, roll-to-roll printed Surface Enhanced Raman Scattering (SERS) technology as well as UV imprinted waveguide sensor for formaldehyde detection.
Integration of electro-optical mechanical systems and medicine: where are we and where can we go?
NASA Astrophysics Data System (ADS)
Gourley, Mark F.; Gourley, Paul L.
1997-03-01
The marriage of microfabricated materials with microbiological systems will allow advances in medicine to proceed at an unprecedented pace. Biomedical research is placing new demands on speed and limits of detection to assay body tissues and fluids. Emerging microfabricated chip technologies from the engineering community offer researchers novel types of analysis of human samples. In guiding these developments, the ability to swiftly and accurately gain useful information for identification and establish a diagnosis, is of utmost importance. Current examples of such technology include DNA amplification and analysis, and fluorescent cell analysis by flow cytometry. Potential applications include the development of rapid techniques for examining large number of cells in tissue or in blood. These could serve as screening tools for the detection and quantification of abnormal cell types; for example malignant or HIV infected cells. Micro/nanofabrication methods will make these devices compact, providing access of this technology to point of care providers; in a clinic, ambulance, or on a battlefield. Currently, these tools are in the construction phase. Upon delivery to researchers, validation of these instruments leads to clinical demand that requires approval from the Food and Drug Administration. This paper outlines criteria that successful devices must satisfy.
Calibrating an optical scanner for quality assurance of large area radiation detectors
NASA Astrophysics Data System (ADS)
Karadzhinova, A.; Hildén, T.; Berdova, M.; Lauhakangas, R.; Heino, J.; Tuominen, E.; Franssila, S.; Hæggström, E.; Kassamakov, I.
2014-11-01
A gas electron multiplier (GEM) is a particle detector used in high-energy physics. Its main component is a thin copper-polymer-copper sandwich that carries Ø =70 ± 5 µm holes. Quality assurance (QA) is needed to guarantee both long operating life and reading fidelity of the GEM. Absence of layer defects and conformity of the holes to specifications is important. Both hole size and shape influence the detector’s gas multiplication factor and hence affect the collected data. For the scanner the required lateral measurement tolerance is ± 5 µm. We calibrated a high aspect ratio optical scanning system (OSS) to allow ensuring the quality of large GEM foils. For the calibration we microfabricated transfer standards, which were imaged with the OSS and which were compared to corresponding scanning electron microscopy (SEM) images. The calibration fulfilled the ISO/IEC 17025 and UKAS M3003 requirements: the calibration factor was 1.01 ± 0.01, determined at 95% confidence level across a 950 × 950 mm2 area. The proposed large-scale scanning technique can potentially be valuable in other microfabricated products too.
EMERGING MICROTECHNOLOGIES FOR THE DEVELOPMENT OF ORAL DRUG DELIVERY DEVICES
Chirra, Hariharasudhan D.; Desai, Tejal A.
2012-01-01
The development of oral drug delivery platforms for administering therapeutics in a safe and effective manner across the gastrointestinal epithelium is of much importance. A variety of delivery systems such as enterically coated tablets, capsules, particles, and liposomes have been developed to improve oral bioavailability of drugs. However, orally administered drugs suffer from poor localization and therapeutic efficacy due to various physiological conditions such as low pH, and high shear intestinal fluid flow. Novel platforms combining controlled release, improved adhesion, tissue penetration, and selective intestinal targeting may overcome these issues and potentially diminish the toxicity and high frequency of administration associated with conventional oral delivery. Microfabrication along with appropriate surface chemistry, provide a means to fabricate these platforms en masse with flexibility in tailoring the shape, size, reservoir volume, and surface characteristics of microdevices. Moreover, the same technology can be used to include integrated circuit technology and sensors for designing sophisticated autonomous drug delivery devices that promise to significantly improve point of care diagnostic and therapeutic medical applications. This review sheds light on some of the fabrication techniques and addresses a few of the microfabricated devices that can be effectively used for controlled oral drug delivery applications. PMID:22981755
Microfabrication of microsystem-enabled photovoltaic (MEPV) cells
NASA Astrophysics Data System (ADS)
Nielson, Gregory N.; Okandan, Murat; Cruz-Campa, Jose L.; Resnick, Paul J.; Wanlass, Mark W.; Clews, Peggy J.; Pluym, Tammy C.; Sanchez, Carlos A.; Gupta, Vipin P.
2011-02-01
Microsystem-Enabled Photovoltaic (MEPV) cells allow solar PV systems to take advantage of scaling benefits that occur as solar cells are reduced in size. We have developed MEPV cells that are 5 to 20 microns thick and down to 250 microns across. We have developed and demonstrated crystalline silicon (c-Si) cells with solar conversion efficiencies of 14.9%, and gallium arsenide (GaAs) cells with a conversion efficiency of 11.36%. In pursuing this work, we have identified over twenty scaling benefits that reduce PV system cost, improve performance, or allow new functionality. To create these cells, we have combined microfabrication techniques from various microsystem technologies. We have focused our development efforts on creating a process flow that uses standard equipment and standard wafer thicknesses, allows all high-temperature processing to be performed prior to release, and allows the remaining post-release wafer to be reprocessed and reused. The c-Si cell junctions are created using a backside point-contact PV cell process. The GaAs cells have an epitaxially grown junction. Despite the horizontal junction, these cells also are backside contacted. We provide recent developments and details for all steps of the process including junction creation, surface passivation, metallization, and release.
Optical forces near micro-fabricated devices
NASA Astrophysics Data System (ADS)
Mejia Prada, Camilo Andres
In this dissertation, I study optical forces near micro-fabricated devices for multi- particle manipulation. I consider particles of different sizes and compositions. In particular, I focus my study on both dielectric and gold particles as well as Giant Unilamellar Vesicles. First, I consider optical forces near a PhC and establish the feasibility of a technique which we term Light-Assisted Templated Self-assembly (LATS). In contrast to previous work on Fabry-Perot enhancement of trapping forces above a flat substrate, I exploit the guided resonance modes of a PhC to provide resonant enhancement of optical forces. Then, I explore optical forces near a Dual Beam Optical Trap (DBOT). I present a method to extract the bending modulus of the membrane from the area strain data. This method incorporates three-dimensional ray-tracing to calculate the applied stress in the DBOT within the ray optics approximation. I compare the optical force calculated using the ray optics approximation and Maxwell Stress Tensor method to ensure the approximation's accuracy. Next, we apply this method to 3 populations of GUVs to extract the bending modulus of membranes comprised of saturated and monounsaturated lipids in both gel and liquid phases.
Stopped-flow enzyme assays on a chip using a microfabricated mixer.
Burke, Brian J; Regnier, Fred E
2003-04-15
This paper describes a microfabricated enzyme assay system including a micromixer that can be used to perform stopped-flow reactions. Samples and reagents were transported into the system by electroosmotic flow (EOF). Streams of reagents were merged and passed through the 100-pL micromixer in < 1 s. The objective of the work was to perform kinetically based enzyme assays in the stopped-flow mode using a system of roughly 6 nL volume. Beta-galactosidase (beta-Gal) was chosen as a model enzyme for these studies and was used to convert the substrate fluorescein mono-beta-D-galactopyranoside (FMG) into fluorescein. Results obtained with microfabricated systems using the micromixer compared well to those obtained with an external T mixing device. In contrast, assays performed in a microfabricated device by merging two streams and allowing mixing to occur by lateral diffusion did not compare well. Using the microfabricated mixer, Km and kcat values of 75 +/- 13 microM and 44 +/- 3 s(-1) were determined. These values compare well to those obtained with the conventional stopped-flow apparatus for which Km was determined to be 60 +/- 6 microM and kcat was 47 +/- 4 s(-1). Enzyme inhibition assays with phenylethyl-beta-D-thiogalactoside (PETG) were also comparable. It was concluded that kinetically based, stopped-flow enzyme assays can be performed in 60 s or less with a miniaturized system of roughly 6 nL liquid volume when mixing is assisted with the described device.
Micro-fabricated DC comparison calorimeter for RF power measurement.
Neji, Bilel; Xu, Jing; Titus, Albert H; Meltzer, Joel
2014-10-27
Diode detection and bolometric detection have been widely used to measure radio frequency (RF) power. However, flow calorimeters, in particular micro-fabricated flow calorimeters, have been mostly unexplored as power meters. This paper presents the design, micro-fabrication and characterization of a flow calorimeter. This novel device is capable of measuring power from 100 μW to 200 mW. It has a 50-Ohm load that is heated by the RF source, and the heat is transferred to fluid in a microchannel. The temperature change in the fluid is measured by a thermistor that is connected in one leg of a Wheatstone bridge. The output voltage change of the bridge corresponds to the RF power applied to the load. The microfabricated device measures 25.4 mm × 50.8 mm, excluding the power supplies, microcontroller and fluid pump. Experiments demonstrate that the micro-fabricated sensor has a sensitivity up to 22 × 10⁻³ V/W. The typical resolution of this micro-calorimeter is on the order of 50 μW, and the best resolution is around 10 μW. The effective efficiency is 99.9% from 0−1 GHz and more than 97.5% at frequencies up to 4 GHz. The measured reflection coefficient of the 50-Ohm load and coplanar wave guide is less than −25 dB from 0−2 GHz and less than −16 dB at 2−4 GHz.
NASA Astrophysics Data System (ADS)
Narita, Hideki; Ikhlas, Muhammad; Kimata, Motoi; Nugroho, Agustinus Agung; Nakatsuji, Satoru; Otani, YoshiChika
2017-11-01
Toward realizing a thermopile made of the chiral anti-ferromagnet Mn3Sn, focused ion beam (FIB) lithography was employed to microfabricate a thermoelectric element consisting of a Ta/Al2O3/Mn3Sn layered structure. In this device, the Ta layer acts as a heater producing Joule heat diffusing across the Al2O3 insulating layer into the thin Mn3Sn layer. The measured Nernst signal exhibits a clear hysteresis in an applied temperature gradient and magnetic field at 300 K, and its magnitude is proportional to the square of the electrical current applied to the Ta heater. The spontaneous, zero field voltage signal in the device is of the order of a few μV, which is almost the same order of magnitude as observed in the bulk single-crystal Mn3Sn under a temperature gradient. The anomalous Nernst coefficient SANE of the microfabricated element was determined using a temperature gradient simulated by finite-element modeling. The obtained value of SANE is 0.27 μV/K, which is in good agreement with that of the reported experimental value of SANE (0.3 μV/K) for bulk single-crystal Mn3Sn. This result indicates that FIB microfabrication does not significantly alter the thermoelectric properties of bulk Mn3Sn. As the chiral antiferromagnet produces almost no stray field, our study opens the avenue for the fabrication of an efficient thermopile by densely packing the microfabricated antiferromagnetic elements.
Femtosecond laser microfabrication in polymers towards memory devices and microfluidic applications
NASA Astrophysics Data System (ADS)
Deepak, K. L. N.; Venugopal Rao, S.; Narayana Rao, D.
2011-12-01
We have investigated femtosecond laser induced microstructures, gratings, and craters in four different polymers: poly methyl methacrylate (PMMA), poly dimethyl siloxane (PDMS), polystyrene (PS) and poly vinyl alcohol (PVA) using Ti:sapphire laser delivering 800 nm, 100 femtosecond (fs) pulses at 1 kHz repetition rate with a maximum pulse energy of 1 mJ. Local chemical modifications leading to the formation of optical centers and peroxide radicals which were studied using UV-Visible absorption and emission, confocal micro-Raman and Electron Spin Resonance (ESR) spectroscopic techniques.
Descamps, Emeline; Duroure, Nathalie; Deiss, Frédérique; Leichlé, Thierry; Adam, Catherine; Mailley, Pascal; Aït-Ikhlef, Ali; Livache, Thierry; Nicu, Liviu; Sojic, Neso
2013-08-07
Optical nanotip arrays fabricated on etched fiber bundles were functionalized with DNA spots. Such unconventional substrates (3D and non-planar) are difficult to pattern with standard microfabrication techniques but, using an electrochemical cantilever, up to 400 spots were electrodeposited on the nanostructured optical surface in 5 min. This approach allows each spot to be addressed individually and multiplexed fluorescence detection is demonstrated. Finally, remote fluorescence detection was performed by imaging through the optical fiber bundle itself after hybridisation with the complementary sequence.
Development of a Web-Based System to Support Self-Directed Learning of Microfabrication Technologies
ERIC Educational Resources Information Center
Jou, Min; Wu, Yu-Shiang
2012-01-01
Having engineers in microfabrication technologies educated has become much more difficult than having engineers educated in the traditional technologies, and this may be because of the high cost for acquirement of equipment, materials, and infrastructural means (i.e., cleaning rooms), all in addition to the hands-on practices that are often times…
Microfabricated pressure and shear stress sensors
NASA Technical Reports Server (NTRS)
Liu, Chang (Inventor); Chen, Jack (Inventor); Engel, Jonathan (Inventor)
2009-01-01
A microfabricated pressure sensor. The pressure sensor comprises a raised diaphragm disposed on a substrate. The diaphragm is configured to bend in response to an applied pressure difference. A strain gauge of a conductive material is coupled to a surface of the raised diaphragm and to at least one of the substrate and a piece rigidly connected to the substrate.
Microfabricated bulk wave acoustic bandgap device
Olsson, Roy H.; El-Kady, Ihab F.; McCormick, Frederick; Fleming, James G.; Fleming, Carol
2010-06-08
A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the acoustic wave within an acoustic bandgap. The membrane can be suspended above a substrate by an air or vacuum gap to provide acoustic isolation from the substrate. The device can be fabricated using microelectromechanical systems (MEMS) technologies. Such microfabricated bulk wave phononic bandgap devices are useful for acoustic isolation in the ultrasonic, VHF, or UHF regime (i.e., frequencies of order 1 MHz to 10 GHz and higher, and lattice constants of order 100 .mu.m or less).
Microfabricated bulk wave acoustic bandgap device
Olsson, Roy H.; El-Kady, Ihab F.; McCormick, Frederick; Fleming, James G.; Fleming, legal representative, Carol
2010-11-23
A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the acoustic wave within an acoustic bandgap. The membrane can be suspended above a substrate by an air or vacuum gap to provide acoustic isolation from the substrate. The device can be fabricated using microelectromechanical systems (MEMS) technologies. Such microfabricated bulk wave phononic bandgap devices are useful for acoustic isolation in the ultrasonic, VHF, or UHF regime (i.e., frequencies of order 1 MHz to 10 GHz and higher, and lattice constants of order 100 .mu.m or less).
Microfabricated bragg waveguide
Fleming, James G.; Lin, Shawn-Yu; Hadley, G. Ronald
2004-10-19
A microfabricated Bragg waveguide of semiconductor-compatible material having a hollow core and a multilayer dielectric cladding can be fabricated by integrated circuit technologies. The microfabricated Bragg waveguide can comprise a hollow channel waveguide or a hollow fiber. The Bragg fiber can be fabricated by coating a sacrificial mandrel or mold with alternating layers of high- and low-refractive-index dielectric materials and then removing the mandrel or mold to leave a hollow tube with a multilayer dielectric cladding. The Bragg channel waveguide can be fabricated by forming a trench embedded in a substrate and coating the inner wall of the trench with a multilayer dielectric cladding. The thicknesses of the alternating layers can be selected to satisfy the condition for minimum radiation loss of the guided wave.
Maruo, Shoji; Hasegawa, Takuya; Yoshimura, Naoki
2009-11-09
In high-precision two-photon microfabrication of three-dimensional (3-D) polymeric microstructures, supercritical CO(2) drying was employed to reduce surface tension, which tends to cause the collapse of micro/nano structures. Use of supercritical drying allowed high-aspect ratio microstructures, such as micropillars and cantilevers, to be fabricated. We also propose a single-anchor supporting method to eliminate non-uniform shrinkage of polymeric structures otherwise caused by attachment to the substrate. Use of this method permitted frame models such as lattices to be produced without harmful distortion. The combination of supercritical CO(2) drying and the single-anchor supporting method offers reliable high-precision microfabrication of sophisticated, fragile 3-D micro/nano structures.
Micro-thermocouple probe for measurement of cellular thermal responses.
Watanabe, M; Kakuta, N; Mabuchi, K; Yamada, Y
2005-01-01
We have produced micro-thermocouple probes for the measurement of cellular thermal responses. Cells generate heat with their metabolisms and more heat with reactions to a certain physical or chemical stimulation. Therefore, the analysis of the cellular thermal responses would provide new physiological information. However, a real-time thermal measurement technique on a target of a single cell has not been established. In this study, glass micropipettes, which are widely used in bioengineering and medicine, are used for the base of the thermocouple probes. Using microfabrication techniques, the junction of two different metal films is formed at the micropipette tip with a diameter of 1 μm. This probe can inject a chemical substance into a cell and to detect its subsequent temperature changes simultaneously.
NASA Astrophysics Data System (ADS)
Xu, Jian; Midorikawa, Katsumi; Sugioka, Koji
2014-03-01
A simple and flexible technique for integrating metal micropatterns into glass microfluidic structures based on threedimensional femtosecond laser microfabrication is presented. Femtosecond laser direct writing followed by thermal treatment and successive chemical etching allows us to fabricate three-dimensional microfluidic structures such as microchannels and microreservoirs inside photosensitive glass. Then, the femtosecond laser direct-write ablation followed by electroless metal plating enables space-selective deposition of patterned metal films on desired locations of internal walls of the fabricated microfluidic structures. The developed technique is applied to integrate a metal microheater into a glass microchannel to control the temperature of liquid samples in the channel, which can be used as a microreactor for enhancement of chemical reactions.
3D Micropatterned Surface Inspired by Salvinia molesta via Direct Laser Lithography.
Tricinci, Omar; Terencio, Tercio; Mazzolai, Barbara; Pugno, Nicola M; Greco, Francesco; Mattoli, Virgilio
2015-11-25
Biomimetic functional surfaces are attracting increasing attention for their relevant technological applications. Despite these efforts, inherent limitations of microfabrication techniques prevent the replication of complex hierarchical microstructures. Using a 3D laser lithography technique, we fabricated a 3D patterned surface bioinspired to Salvinia molesta leaves. The artificial hairs, with crownlike heads, were reproduced by scaling down (ca. 100 times smaller) the dimensions of natural features, so that microscale hairs with submicrometric resolution were attained. The micropatterned surface, in analogy with the natural model, shows interesting properties in terms of hydrophobicity and air retention when submerged by water, even if realized with a hydrophilic material. Furthermore, we successfully demonstrated the capability to promote localized condensation of water droplets from moisture in the atmosphere.
Microfabricated valveless devices for thermal bioreactions based on diffusion-limited evaporation.
Wang, Fang; Yang, Ming; Burns, Mark A
2008-01-01
Microfluidic devices that reduce evaporative loss during thermal bioreactions such as PCR without microvalves have been developed by relying on the principle of diffusion-limited evaporation. Both theoretical and experimental results demonstrate that the sample evaporative loss can be reduced by more than 20 times using long narrow diffusion channels on both sides of the reaction region. In order to further suppress the evaporation, the driving force for liquid evaporation is reduced by two additional techniques: decreasing the interfacial temperature using thermal isolation and reducing the vapor concentration gradient by replenishing water vapor in the diffusion channels. Both thermal isolation and vapor replenishment techniques can limit the sample evaporative loss to approximately 1% of the reaction content.
Microfabricated field calibration assembly for analytical instruments
Robinson, Alex L [Albuquerque, NM; Manginell, Ronald P [Albuquerque, NM; Moorman, Matthew W [Albuquerque, NM; Rodacy, Philip J [Albuquerque, NM; Simonson, Robert J [Cedar Crest, NM
2011-03-29
A microfabricated field calibration assembly for use in calibrating analytical instruments and sensor systems. The assembly comprises a circuit board comprising one or more resistively heatable microbridge elements, an interface device that enables addressable heating of the microbridge elements, and, in some embodiments, a means for positioning the circuit board within an inlet structure of an analytical instrument or sensor system.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Woolley, A.T.; deMello, A.J.; Mathies, R.A.
Microfabricated silicon PCR reactors and glass capillary electrophoresis (CE) chips have been successfully coupled to form an integrated DNA analysis system. This construct combines the rapid thermal cycling capabilities of microfabricated PCR devices (10{degree}C/s heating, 2.5{degree}C/s cooling) with the high-speed (<120 s) DNA separations provided by microfabricated CE chips. The PCR chamber and the CE chip were directly linked through a photolithographically fabricated channel filled with hydroxyethylcellulose sieving matrix. Electrophoretic injection directly from the PCR chamber through the cross injection channel was used as an `electrophoretic valve` to couple the PCR and CE devices on-chip. To demonstrate the functionality ofmore » this system, a 15 min PCR amplification of a {Beta}-globin target cloned in m13 was immediately followed by high-speed CE chip separation in under 120 s, providing a rapid PCR-CE analysis in under 20 min. A rapid assay for genomic Salmonella DNA was performed in under 45 min, demonstrating that challenging amplifications of diagnostically interesting targets can also be performed. Real-time monitoring of PCR target amplification in these integrated PCR-CE devices is also feasible. 33 refs., 6 figs.« less
2015-01-01
In this work, we report on the development of a palladium-based, microfabricated point-of-care electrochemical sensor for the determination of manganese using square wave cathodic stripping voltammetry. Heavy metals require careful monitoring, yet current methods are too complex for a point-of-care system. Voltammetry offers an attractive approach to metal detection on the microscale, but traditional carbon, gold, or platinum electrodes are difficult or expensive to microfabricate, preventing widespread use. Our sensor uses palladium working and auxiliary electrodes and integrates them with a copper-based reference electrode for simple fabrication and compatibility with microfabrication and printed circuit board processing, while maintaining competitive performance in electrochemical detection. Copper electrodes were prepared on glass substrate using a combination of microfabrication procedures followed by electrodeposition of palladium. The disposable sensor system was formed by bonding a poly(dimethylsiloxane) (PDMS) well to the glass substrate. Cathodic stripping voltammetry of manganese using our new disposable palladium-based sensors exhibited 334 nM (18.3 ppb) limit of detection in borate buffer. The sensor was used to demonstrate manganese determination in natural water samples from a pond in Burnet Woods, located in Cincinnati, OH, and the Ohio River. PMID:25476591
Kang, Wenjing; Pei, Xing; Bange, Adam; Haynes, Erin N; Heineman, William R; Papautsky, Ian
2014-12-16
In this work, we report on the development of a palladium-based, microfabricated point-of-care electrochemical sensor for the determination of manganese using square wave cathodic stripping voltammetry. Heavy metals require careful monitoring, yet current methods are too complex for a point-of-care system. Voltammetry offers an attractive approach to metal detection on the microscale, but traditional carbon, gold, or platinum electrodes are difficult or expensive to microfabricate, preventing widespread use. Our sensor uses palladium working and auxiliary electrodes and integrates them with a copper-based reference electrode for simple fabrication and compatibility with microfabrication and printed circuit board processing, while maintaining competitive performance in electrochemical detection. Copper electrodes were prepared on glass substrate using a combination of microfabrication procedures followed by electrodeposition of palladium. The disposable sensor system was formed by bonding a poly(dimethylsiloxane) (PDMS) well to the glass substrate. Cathodic stripping voltammetry of manganese using our new disposable palladium-based sensors exhibited 334 nM (18.3 ppb) limit of detection in borate buffer. The sensor was used to demonstrate manganese determination in natural water samples from a pond in Burnet Woods, located in Cincinnati, OH, and the Ohio River.
On the design and fabrication of nanostructures and devices
NASA Astrophysics Data System (ADS)
Wei, Wei
Nanotechnology is emerging into a new frontier in science and technology with potential impact on every aspect of human life. One of the major breakthroughs in today's nanotechnology is the discovery and preparation of new classes of nanomaterials and nanostructures. A large number of nanomaterials and nanostructures are synthesized and characterized with either new or profoundly enhanced properties or phenomena. However, there are several major challenges ahead need to be overcome before any substantial benefits can be brought to the market. One of the challenges that we need to address today is how to effectively integrate useful nanomaterials and nanostrucrures into functional devices and systems. Our mother nature gives us a classic example of how living organisms are built. Starting from a single cell, through its division and growth, it can self-assemble and become functional tissues and organs. Similar self-assemble approach has been adopted as a nano-fabrication technique to assemble nanomaterials and nanostructures into functional nanodevices. This technique has advantages of high precision and nanometer scale resolution. However, it requires a lot of effort to construct a single device and since the properties of individual nanostructures can be different, the fabricated devices may have different properties. In this dissertation, we design and fabricate nanostructures and devices using novel microfabrication techniques. In the first part of the dissertation, the design and fabrication of a variety of nanostructures, such as metal nanowires array, polymer nanowells, and nanostructured surfaces are discussed. In the second part, carbon nanotubes as a novel material has been explored as an example to demonstrate the integration of nanomaterials with novel microfabrication techniques to form a functional device. First, a resistive heating technique is developed to grow carbon nanotubes in localized regions, such as a nichrome heating coil. Then, MEMS micro-heating structures are designed for patterned carbon nanotubes film growth. At last, a MEMS sensor device using in-situ grown carbon nanotubes film as a sensing element is developed. The sensor shows sensitivity to hydrogen gas down to 100 ppm. A hypothetic model based on contact resistance modulation is presented to explain the observed sensing properties.
Microactuators as driving units for microbotic systems
NASA Astrophysics Data System (ADS)
Lehr, Heinz; Abel, S.; Doepper, J.; Ehrfeld, Wolfgang; Hagemann, B.; Kaemper, Klaus P.; Michel, Frank; Schulz, Ch.; Theurigen, C.
1996-12-01
The trend towards the integration of a multitude of functions in e.g. data end-, medical- and communication systems pushes the miniaturization of actuators for linear or rotational motions. Technical advantages of these devices are their low energy consumption, their potential for high precision positioning and their low inertial masses, which allow e.g. huge rotational frequencies. Appreciable forces and torques as well as appropriate mechanical interfaces to integrate these drive units into complete systems are necessary prerequisites for robotic applications, but rarely found up to now. Most of these difficulties arise due to the application of monolithic fabrication techniques, leading to structures of essentially planar nature and severe material restrictions. It turned out that only hybrid concepts and the assembly of components made from the most appropriate material open the chance to build up microactuators which are well suited for microrobotic systems. The contribution starts with a short description of the LIGA technique, which constitutes the major 3-D microfabrication method for the production of individual actuator components with structural heights of up to several millimeters made from a variety of function adapted materials. The assembling of these components results in microactuators with typical dimensions in the millimeter range. Examples are powerful electromagnetic micromotors, delivering torques much larger than one (mu) Nm and high rotational speeds which may be converted by use of LIGA fabricated gear-wheels to furthermore increase the torque. Huge forces are obtained in addition by use of microfabricated fluidic systems. Although small in size, the actuators still offer good handling opportunities and interfacing facilities to build up more complicated robotic systems.
Design, simulation and characterisation of integrated optics for a microfabricated flow cytometer
NASA Astrophysics Data System (ADS)
Barat, David; Benazzi, Giuseppe; Mowlem, Matthew Charles; Ruano, Jesus Miguel; Morgan, Hywel
2010-05-01
Flow cytometry is widely used for analyzing micro-particles such as cells and bacteria. Microfabricated flow cytometers promise reduced instrument size and cost with increased robustness and have application in medicine, life sciences and environmental metrology. Further miniaturisation and robustness can be achieved if integrated optics are used instead of traditional free space optics. We present designs simulation and experimental characterisation of integrated optics for a microfabricated cytometer made from SU-8 resin on a glass substrate. The optics constructed from combinations of optical fibres (positioned with microgrooves), waveguides, and microlenses enable analysis of scattered light and fluorescence from particles positioned near the centre of a microchannel using one dimensional sheath flow. Four different methods for directing the incident light onto the particles are examined and the optimum design discussed.
Development of a Micro-Fabricated Total-Field Magnetometer
2011-03-01
are made with fluxgate technologies. Fluxgates have lower sensitivity than Cs magnetometers , yet they continue to be used in small wands simply...extraction process by providing the sensitivity of a Cs magnetometer with the convenience and low cost of a fluxgate wand. Extremely small and low cost...FINAL REPORT Development of a Micro-Fabricated Total-Field Magnetometer SERDP Project MR-1512 MARCH 2011 Mark Prouty Geometrics, Inc
Design and Control of Flapping Wing Micro Air Vehicles
2011-09-01
unsteady, low Re aerodynamics, micro-fabrication, and fluid - structure interaction. However, research into flapping wing control of such MAVs...and flown in confined spaces such as urban canyons, caves and indoors. MAVs will provide an organic ISR capability to small combat teams in the...Designing for highly coupled fluid -structure interactions Micro-fabrication Stability characterization and control Of these challenges, the most
Shock waves in molecular solids: ultrafast vibrational spectroscopy of the first nanosecond
NASA Astrophysics Data System (ADS)
Franken, J.; Hambir, S. A.; Hare, D. E.; Dlott, D. D.
A novel technique which uses a microfabricated shock target array assembly is described, where the passage of a shock front through a thin (0.5μm) polycrystalline layer and the subsequent unloading process is monitored in real time with ultrafast coherent Raman spectroscopy. Using a high repetition rate laser shock generation technique, high resolution, coherent Raman spectra are obtained in shocked anthracene and in a high explosive material, NTO, with time resolution of 50 ps. Spectroscopic measurements are presented which yield the shock pressure (up to 5 GPa), the shock velocity ( 4 km/s), the shock front risetime (tr < 25 ps), and the temperature ( 400°C). A brief discussion is presented, how this new technique can be used to determine the Hugoniot, the equation of state, the entropy increase across the shock front, and monitor shock induced chemical reactions in real time.
From Theoretical Physics to Cancer Diagnostics
NASA Astrophysics Data System (ADS)
Tang, Cha-Mei
The core technologies of our company are techniques in high aspect ratio microfabrication. We are currently applying them to the development of x-ray phase contrast imaging systems and blood test for early detection of solid tumors. Good research does not always mean marketable products. Large market size is critical for commercialization. Excellent and accurate science is important, but not sufficient. We are learning that commercialization requires different expertise, experienced advisors, well known board of directors, partnerships, and investments. Our technologies have the potential of reaching multi-billion dollar sales, and we hope we will achieve that goal.
Adaptation of ion beam technology to microfabrication of solid state devices and transducers
NASA Technical Reports Server (NTRS)
Topich, J. A.
1977-01-01
It was found that ion beam texturing of silicon surfaces can be used to increase the effective surface area of MOS capacitors. There is, however, a problem with low dielectric breakdown. Preliminary work was begun on the fabrication of ion implanted resistors on textured surfaces and the potential improvement of wire bond strength by bonding to a textured surface. In the area of ion beam sputtering, the techniques for sputtering PVC were developed. A PVC target containing valinomycin was used to sputter an ion selective membrane on a field effect transistor to form a potassium ion sensor.
Laser Transfer of Metals and Metal Alloys for Digital Microfabrication of 3D Objects.
Zenou, Michael; Sa'ar, Amir; Kotler, Zvi
2015-09-02
3D copper logos printed on epoxy glass laminates are demonstrated. The structures are printed using laser transfer of molten metal microdroplets. The example in the image shows letters of 50 µm width, with each letter being taller than the last, from a height of 40 µm ('s') to 190 µm ('l'). The scanning microscopy image is taken at a tilt, and the topographic image was taken using interferometric 3D microscopy, to show the effective control of this technique. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Control of microfabricated structures powered by flagellated bacteria using phototaxis
NASA Astrophysics Data System (ADS)
Steager, Edward; Kim, Chang-Beom; Patel, Jigarkumar; Bith, Socheth; Naik, Chandan; Reber, Lindsay; Kim, Min Jun
2007-06-01
Flagellated bacteria have been employed as microactuators in low Reynolds number fluidic environments. SU-8 microstructures have been fabricated and released on the surface of swarming Serratia marcescens, and the flagella propel the structures along the swarm surface. Phototactic control of these structures is demonstrated by exposing the localized regions of the swarm to ultraviolet light. The authors additionally discuss the control of microstructures in an open channel powered by bacteria which have been docked through a blotting technique. A tracking algorithm has been developed to analyze swarming patterns of the bacteria as well as the kinematics of the microstructures.
Dang, Fuquan; Tabata, Osamu; Kurokawa, Masaya; Ewis, Ashraf A; Zhang, Lihua; Yamaoka, Yoshihisa; Shinohara, Shouji; Shinohara, Yasuo; Ishikawa, Mitsuru; Baba, Yoshinobu
2005-04-01
We have developed a novel technique for mass production of microfabricated capillary array electrophoresis (mu-CAE) plastic chips for high-speed, high-throughput genetic analysis. The mu-CAE chips, containing 10 individual separation channels of 50-microm width, 50-microm depth, and a 100-microm lane-to-lane spacing at the detection region and a sacrificial channel network, were fabricated on a poly(methyl methacrylate) substrate by injection molding and then bonded manually using a pressure-sensitive sealing tape within several seconds at room temperature. The conditions for injection molding and bonding were carefully characterized to yield mu-CAE chips with well-defined channel and injection structures. A CCD camera equipped with an image intensifier was used to monitor simultaneously the separation in a 10-channel array with laser-induced fluorescence detection. High-performance electrophoretic separations of phiX174 HaeIII DNA restriction fragments and PCR products related to the human beta-globin gene and SP-B gene (the surfactant protein B) have been demonstrated on mu-CAE plastic chips using a methylcellulose sieving matrix in individual channels. The current work demonstrated greatly simplified the fabrication process as well as a detection scheme for mu-CAE chips and will bring the low-cost mass production and application of mu-CAE plastic chips for genetic analysis.
Le Gac, Séverine; Rolando, Christian; Arscott, Steve
2006-01-01
This paper describes a novel emitter tip having the shape of a nib and based on an open structure for nano-electrospray ionization mass spectrometry (nanoESI-MS). The nib structure is fabricated with standard lithography techniques using SU-8, an epoxy-based negative photoresist. The tip is comprised of a reservoir, a capillary slot and a point-like feature, and is fabricated on a silicon wafer. We present here a novel scheme for interfacing such nib tips to MS by applying the ionization voltage directly onto the semi-conductor support. The silicon support is in direct contact with the liquid to be analyzed at the reservoir and microchannel level, thus allowing easy use in ESI-MS. This scheme is especially advantageous for automated analysis as the manual step of positioning a metallic wire into the reservoir is avoided. In addition, the analysis performance was enhanced compared with the former scheme, as demonstrated by the tests of standard peptides (gramicidin S, Glu-fibrinopeptide B). The limit of detection was determined to be lower than 10(-2) microM. Due to their enhanced performance, these microfabricated sources might be of great interest for analysis requiring very high sensitivity, such as proteomics analysis using nanoESI-MS.
Novel microfluidic device for the continuous separation of cancer cells using dielectrophoresis.
Alazzam, Anas; Mathew, Bobby; Alhammadi, Falah
2017-03-01
We describe the design, microfabrication, and testing of a microfluidic device for the separation of cancer cells based on dielectrophoresis. Cancer cells, specifically green fluorescent protein-labeled MDA-MB-231, are successfully separated from a heterogeneous mixture of the same and normal blood cells. MDA-MB-231 cancer cells are separated with an accuracy that enables precise detection and counting of circulating tumor cells present among normal blood cells. The separation is performed using a set of planar interdigitated transducer electrodes that are deposited on the surface of a glass wafer and slightly protrude into the separation microchannel at one side. The device includes two parts, namely, a glass wafer and polydimethylsiloxane element. The device is fabricated using standard microfabrication techniques. All experiments are conducted with low conductivity sucrose-dextrose isotonic medium. The variation in response between MDA-MB-231 cancer cells and normal cells to a certain band of alternating-current frequencies is used for continuous separation of cells. The fabrication of the microfluidic device, preparation of cells and medium, and flow conditions are detailed. The proposed microdevice can be used to detect and separate malignant cells from heterogeneous mixture of cells for the purpose of early screening for cancer. © 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
An optical apparatus for rotation and trapping
Gutiérrez-Medina, Braulio; Andreasson, Johan O. L.; Greenleaf, William J.; LaPorta, Arthur; Block, Steven M.
2010-01-01
We present details of the design, construction and testing of a single-beam optical tweezers apparatus capable of measuring and exerting torque, as well as force, on microfabricated, optically anisotropic particles (an ‘optical torque wrench’). The control of angular orientation is achieved by rotating the linear polarization of a trapping laser with an electro-optic modulator (EOM), which affords improved performance over previous designs. The torque imparted to the trapped particle is assessed by measuring the difference between left- and right-circular components of the transmitted light, and constant torque is maintained by feeding this difference signal back into a custom-designed electronic servo loop. The limited angular range of the EOM (±180°) is extended by rapidly reversing the polarization once a threshold angle is reached, enabling the torque clamp to function over unlimited, continuous rotations at high bandwidth. In addition, we developed particles suitable for rotation in this apparatus using microfabrication techniques. Altogether, the system allows for the simultaneous application of forces (~0.1–100 pN) and torques (~1–10,000 pN nm) in the study of biomolecules. As a proof of principle, we demonstrate how our instrument can be used to study the supercoiling of single DNA molecules. PMID:20627165
Three Dimensional Microfabrication On Thick Film Photoresist Mandrels
NASA Astrophysics Data System (ADS)
Salmre, William
1984-05-01
Small, three-dimensional structures are fabricated by the use of thick film photoresist mandrels as substrates for electoforming or other deposition techniques. Novel methods have been developed for the sculpting of the resist to desired shapes. These techniques rely heavily on the use of glass or other substrates coated with layers of metal. The metal serves both as a photomask and as a conductor of electricity. Commercially available chrome-on-glass photomasks are convenient for this purpose although other substrates have also been used. By controlling the thickness and light transmission of the metal layer, the amount of exposure of the resist can also be controlled to produce the desired shapes in the resist. For even more complex mandrels the resist can be exposed from both sides using self-aligned photomasks.
3D Micropatterned Surface Inspired by Salvinia molesta via Direct Laser Lithography
2015-01-01
Biomimetic functional surfaces are attracting increasing attention for their relevant technological applications. Despite these efforts, inherent limitations of microfabrication techniques prevent the replication of complex hierarchical microstructures. Using a 3D laser lithography technique, we fabricated a 3D patterned surface bioinspired to Salvinia molesta leaves. The artificial hairs, with crownlike heads, were reproduced by scaling down (ca. 100 times smaller) the dimensions of natural features, so that microscale hairs with submicrometric resolution were attained. The micropatterned surface, in analogy with the natural model, shows interesting properties in terms of hydrophobicity and air retention when submerged by water, even if realized with a hydrophilic material. Furthermore, we successfully demonstrated the capability to promote localized condensation of water droplets from moisture in the atmosphere. PMID:26558410
Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print
NASA Astrophysics Data System (ADS)
Grigoras, Kestutis; Grönberg, Leif; Ahopelto, Jouni; Prunnila, Mika
2017-05-01
We have fabricated a micro-supercapacitor with porous silicon electrodes coated with TiN by atomic layer deposition technique. The coating provides an efficient surface passivation and high electrical conductivity of the electrodes, resulting in stable and almost ideal electrochemical double layer capacitor behavior with characteristics comparable to the best carbon based micro-supercapacitors. Stability of the supercapacitor is verified by performing 50 000 voltammetry cycles with high capacitance retention obtained. Silicon microfabrication techniques facilitate integration of both supercapacitor electrodes inside the silicon substrate and, in this work, such in-chip supercapacitor is demonstrated. This approach allows realization of very high capacitance per foot print area. The in-chip micro-supercapacitor can be integrated with energy harvesting elements and can be used in wearable and implantable microdevices.
Review article: Fabrication of nanofluidic devices
Duan, Chuanhua; Wang, Wei; Xie, Quan
2013-01-01
Thanks to its unique features at the nanoscale, nanofluidics, the study and application of fluid flow in nanochannels/nanopores with at least one characteristic size smaller than 100 nm, has enabled the occurrence of many interesting transport phenomena and has shown great potential in both bio- and energy-related fields. The unprecedented growth of this research field is apparently attributed to the rapid development of micro/nanofabrication techniques. In this review, we summarize recent activities and achievements of nanofabrication for nanofluidic devices, especially those reported in the past four years. Three major nanofabrication strategies, including nanolithography, microelectromechanical system based techniques, and methods using various nanomaterials, are introduced with specific fabrication approaches. Other unconventional fabrication attempts which utilize special polymer properties, various microfabrication failure mechanisms, and macro/microscale machining techniques are also presented. Based on these fabrication techniques, an inclusive guideline for materials and processes selection in the preparation of nanofluidic devices is provided. Finally, technical challenges along with possible opportunities in the present nanofabrication for nanofluidic study are discussed. PMID:23573176
Microfabrication of a platform to measure and manipulate the mechanics of engineered microtissues.
Ramade, Alexandre; Legant, Wesley R; Picart, Catherine; Chen, Christopher S; Boudou, Thomas
2014-01-01
Engineered tissues can be used to understand fundamental features of biology, develop organotypic in vitro model systems, and as engineered tissue constructs for replacing damaged tissue in vivo. However, a key limitation is an inability to test the wide range of parameters that might impact the engineered tissue in a high-throughput manner and in an environment that mimics the three-dimensional (3D) native architecture. We developed a microfabricated platform to generate arrays of microtissues embedded within 3D micropatterned matrices. Microcantilevers simultaneously constrain microtissue formation and report forces generated by the microtissues in real time, opening the possibility to use high-throughput, low-volume screening for studies on engineered tissues. Thanks to the micrometer scale of the microtissues, this platform is also suitable for high-throughput monitoring of drug-induced effect on architecture and contractility in engineered tissues. Moreover, independent variations of the mechanical stiffness of the cantilevers and collagen matrix allow the measurement and manipulation of the mechanics of the microtissues. Thus, our approach will likely provide valuable opportunities to elucidate how biomechanical, electrical, biochemical, and genetic/epigenetic cues modulate the formation and maturation of 3D engineered tissues. In this chapter, we describe the microfabrication, preparation, and experimental use of such microfabricated tissue gauges. Copyright © 2014 Elsevier Inc. All rights reserved.
Rapid identification of bacteria with miniaturized pyrolysis/GC analysis
NASA Astrophysics Data System (ADS)
Morgan, Catherine H.; Mowry, Curtis; Manginell, Ronald P.; Frye-Mason, Gregory C.; Kottenstette, Richard J.; Lewis, Patrick
2001-02-01
Identification of bacteria and other biological moieties finds a broad range of applications in the environmental, biomedical, agricultural, industrial, and military arenas. Linking these applications are biological markers such as fatty acids, whose mass spectral profiles can be used to characterize biological samples and to distinguish bacteria at the gram-type, genera, and even species level. Common methods of sample analysis require sample preparation that is both lengthy and labor intensive, especially for whole cell bacteria. The background technique relied on here utilizes chemical derivatization of fatty acids to the more volatile fatty acid methyl esters (FAMEs), which can be separated on a gas chromatograph column or input directly into a mass spectrometer. More recent publications demonstrate improved sample preparation time with in situ derivatization of whole bacterial samples using pyrolysis at the inlet; although much faster than traditional techniques, these systems still rely on bench-top analytical equipment and individual sample preparation. Development of a miniaturized pyrolysis/GC instrument by this group is intended to realize the benefits of FAME identification of bacteria and other biological samples while further facilitating sample handling and instrument portability. The technologies being fabricated and tested have the potential of achieving pyrolysis and FAME separation on a very small scale, with rapid detection time (1-10 min from introduction to result), and with a modular sample inlet. Performance results and sensor characterization will be presented for the first phase of instrument development, encompassing the microfabricated pyrolysis and gas chromatograph elements.
Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof
Mihailovich, Robert E.; Papavasiliou, Alex P.; Mehrotra, Vivek; Stupar, Philip A.; Borwick, III, Robert L.; Ganguli, Rahul; DeNatale, Jeffrey F.
2017-03-28
A micro-fabricated electromagnetic device is provided for on-circuit integration. The electromagnetic device includes a core. The core has a plurality of electrically insulating layers positioned alternatingly between a plurality of magnetic layers to collectively form a continuous laminate having alternating magnetic and electrically insulating layers. The electromagnetic device includes a coil embedded in openings of the semiconductor substrate. An insulating material is positioned in the cavity and between the coil and an inner surface of the core. A method of manufacturing the electromagnetic device includes providing a semiconductor substrate having openings formed therein. Windings of a coil are electroplated and embedded in the openings. The insulating material is coated on or around an exposed surface of the coil. Alternating magnetic layers and electrically insulating layers may be micro-fabricated and electroplated as a single and substantially continuous segment on or around the insulating material.
Microfabricated injectable drug delivery system
Krulevitch, Peter A.; Wang, Amy W.
2002-01-01
A microfabricated, fully integrated drug delivery system capable of secreting controlled dosages of multiple drugs over long periods of time (up to a year). The device includes a long and narrow shaped implant with a sharp leading edge for implantation under the skin of a human in a manner analogous to a sliver. The implant includes: 1) one or more micromachined, integrated, zero power, high and constant pressure generating osmotic engine; 2) low power addressable one-shot shape memory polymer (SMP) valves for switching on the osmotic engine, and for opening drug outlet ports; 3) microfabricated polymer pistons for isolating the pressure source from drug-filled microchannels; 4) multiple drug/multiple dosage capacity, and 5) anisotropically-etched, atomically-sharp silicon leading edge for penetrating the skin during implantation. The device includes an externally mounted controller for controlling on-board electronics which activates the SMP microvalves, etc. of the implant.
Commercialization Issues For Catheter-Based Electrochemical Sensors
NASA Astrophysics Data System (ADS)
Nikolchev, Julian; Gaisford, Scott
1989-08-01
The need for continuous monitoring of key clinical parameters in hospitals is well recognized. Figure 1 shows typical time constants for blood gases, ions and enzymes in response to acute ventilatory changes and interventions. Although it can be seen that relatively low rates of data collection are necessary for many medical measurements, it is also clear that intermittent measurement of P02, PCO2 and pH are not sufficient to provide safe and effective management of the patient. Very frequent or continuous monitoring is often essential. This figure also shows why the emphasis of a large number of research efforts in this country and in Europe and Japan have as their goal the development of continuous blood gas sensors, i.e., sensors that continuously monitor blood pH, partial pressure of oxygen and partial pressure of carbon dioxide. These are three (3) of the most frequent parameters measured in hospitals and the ones having the shortest time constant. Considering that in the United States alone close to 25 million blood gas samples per year are taken from patients, the potential market for continuous monitoring sensors is enormous. The emergence of microelectronics and microfabrication technologies over the past 30 years are now pointing to a possible resolution of the well recognized need for real time monitoring of critically ill patients through catheter-based sensors. Although physicians will always prefer non-invasive monitoring techniques, there are a number of parameters that presently can only be monitored by invasive method. The emerging ability to miniaturize chemical sensors using silicon microfabrication or fiber-optic techniques offer an excellent opportunity to solve this need. In fact, the development of in vivo biomedical sensors with satisfactory performance characteristics has long been considered the ultimate application of these emerging technologies.
Direct 3D bioprinting of perfusable vascular constructs using a blend bioink.
Jia, Weitao; Gungor-Ozkerim, P Selcan; Zhang, Yu Shrike; Yue, Kan; Zhu, Kai; Liu, Wanjun; Pi, Qingment; Byambaa, Batzaya; Dokmeci, Mehmet Remzi; Shin, Su Ryon; Khademhosseini, Ali
2016-11-01
Despite the significant technological advancement in tissue engineering, challenges still exist towards the development of complex and fully functional tissue constructs that mimic their natural counterparts. To address these challenges, bioprinting has emerged as an enabling technology to create highly organized three-dimensional (3D) vascular networks within engineered tissue constructs to promote the transport of oxygen, nutrients, and waste products, which can hardly be realized using conventional microfabrication techniques. Here, we report the development of a versatile 3D bioprinting strategy that employs biomimetic biomaterials and an advanced extrusion system to deposit perfusable vascular structures with highly ordered arrangements in a single-step process. In particular, a specially designed cell-responsive bioink consisting of gelatin methacryloyl (GelMA), sodium alginate, and 4-arm poly(ethylene glycol)-tetra-acrylate (PEGTA) was used in combination with a multilayered coaxial extrusion system to achieve direct 3D bioprinting. This blend bioink could be first ionically crosslinked by calcium ions followed by covalent photocrosslinking of GelMA and PEGTA to form stable constructs. The rheological properties of the bioink and the mechanical strengths of the resulting constructs were tuned by the introduction of PEGTA, which facilitated the precise deposition of complex multilayered 3D perfusable hollow tubes. This blend bioink also displayed favorable biological characteristics that supported the spreading and proliferation of encapsulated endothelial and stem cells in the bioprinted constructs, leading to the formation of biologically relevant, highly organized, perfusable vessels. These characteristics make this novel 3D bioprinting technique superior to conventional microfabrication or sacrificial templating approaches for fabrication of the perfusable vasculature. We envision that our advanced bioprinting technology and bioink formulation may also have significant potentials in engineering large-scale vascularized tissue constructs towards applications in organ transplantation and repair. Copyright © 2016 Elsevier Ltd. All rights reserved.
Integration of microfluidics in animal in vitro embryo production.
Wheeler, M B; Rubessa, M
2017-04-01
The in vitro production of livestock embryos is central to several areas of animal biotechnology. Further, the use of in vitro embryo manipulation is expanding as new applications emerge. ARTs find direct applications in increasing genetic quality of livestock, producing transgenic animals, cloning, artificial insemination, reducing disease transmission, preserving endangered germplasm, producing chimeric animals for disease research, and treating infertility. Whereas new techniques such as nuclear transfer and intracytoplasmic sperm injection are now commonly used, basic embryo culture procedures remain the limiting step to the development of these techniques. Research over the past 2 decades focusing on improving the culture medium has greatly improved in vitro development of embryos. However, cleavage rates and viability of these embryos is reduced compared with in vivo indicating that present in vitro systems are still not optimal. Furthermore, the methods of handling mammalian oocytes and embryos have changed little in recent decades. While pipetting techniques have served embryology well in the past, advanced handling and manipulation technologies will be required to efficiently implement and commercialize the basic biological advances made in recent years. Microfluidic systems can be used to handle gametes, mature oocytes, culture embryos, and perform other basic procedures in a microenvironment that more closely mimic in vivo conditions. The use of microfluidic technologies to fabricate microscale devices has being investigated to overcome this obstacle. In this review, we summarize the development and testing of microfabricated fluidic systems with feature sizes similar to the diameter of an embryo for in vitro production of pre-implantation mammalian embryos. © The Author 2017. Published by Oxford University Press on behalf of the European Society of Human Reproduction and Embryology. All rights reserved. For Permissions, please email: journals.permissions@oup.com.
Upadhye, Kalpesh V.; Candiello, Joseph E.; Davidson, Lance A.; Lin, Hai
2011-01-01
Patch clamp is a powerful tool for studying the properties of ion-channels and cellular membrane. In recent years, planar patch clamp chips have been fabricated from various materials including glass, quartz, silicon, silicon nitride, polydimethyl-siloxane (PDMS), and silicon dioxide. Planar patch clamps have made automation of patch clamp recordings possible. However, most planar patch clamp chips have limitations when used in combination with other techniques. Furthermore, the fabrication methods used are often expensive and require specialized equipments. An improved design as well as fabrication and characterization of a silicon-based planar patch clamp chip are described in this report. Fabrication involves true batch fabrication processes that can be performed in most common microfabrication facilities using well established MEMS techniques. Our planar patch clamp chips can form giga-ohm seals with the cell plasma membrane with success rate comparable to existing patch clamp techniques. The chip permits whole-cell voltage clamp recordings on variety of cell types including Chinese Hamster Ovary (CHO) cells and pheochromocytoma (PC12) cells, for times longer than most available patch clamp chips. When combined with a custom microfluidics chamber, we demonstrate that it is possible to perfuse the extra-cellular as well as intra-cellular buffers. The chamber design allows integration of planar patch clamp with atomic force microscope (AFM). Using our planar patch clamp chip and microfluidics chamber, we have recorded whole-cell mechanosensitive (MS) currents produced by directly stimulating human keratinocyte (HaCaT) cells using an AFM cantilever. Our results reveal the spatial distribution of MS ion channels and temporal details of the responses from MS channels. The results show that planar patch clamp chips have great potential for multi-parametric high throughput studies of ion channel proteins. PMID:22174731
Component-Level Demonstration of a Microfabricated Atomic Frequency Reference
2005-08-01
Kitching, L. A. Liew, and J. Moreland, "A microfabricated atomic clock," Applied Physics Letters, vol. 85, pp. 1460-1462, 2004. [4] R. Lutwak , P...Symposium on Frequency Standards and Metrology, P. Gill, Ed. St. Andrews, Scotland: World Scientific, 2001, pp. 155-166. [31] R. Lutwak , D. Emmons...Frequency and Time Forum. Tampa, FL, 2003, pp. 31-32. [71] R. Lutwak , D. Emmons, T. English, W. Riley, A. Duwel, M. Varghese, D. K. Serkland, and
Microfabricating 3D Structures by Laser Origami
2011-11-09
10.1117/2.1201111.003952 Microfabricating 3D structures by laser origami Alberto Piqué, Scott Mathews, Andrew Birnbaum, and Nicholas Charipar A new...folding known as origami allows the transformation of flat patterns into 3D shapes. A similar approach can be used to generate 3D structures com...materials Figure 1. (A–C) Schematic illustrating the steps in the laser origami process and (D) a resulting folded out-of-plane 3D structure. that can
NASA Technical Reports Server (NTRS)
Ibrahim, Mounir B.; Gedeon, David; Wood, Gary; McLean, Jeffrey
2009-01-01
Under Phase III of NASA Research Announcement contract NAS3-03124, a prototype nickel segmented-involute-foil regenerator was microfabricated and tested in a Sunpower Frequency-Test-Bed (FTB) Stirling convertor. The team for this effort consisted of Cleveland State University, Gedeon Associates, Sunpower Inc. and International Mezzo Technologies. Testing in the FTB convertor produced about the same efficiency as testing with the original random-fiber regenerator. But the high thermal conductivity of the prototype nickel regenerator was responsible for a significant performance degradation. An efficiency improvement (by a 1.04 factor, according to computer predictions) could have been achieved if the regenerator was made from a low-conductivity material. Also, the FTB convertor was not reoptimized to take full advantage of the microfabricated regenerator s low flow resistance; thus, the efficiency would likely have been even higher had the FTB been completely reoptimized. This report discusses the regenerator microfabrication process, testing of the regenerator in the Stirling FTB convertor, and the supporting analysis. Results of the pre-test computational fluid dynamics (CFD) modeling of the effects of the regenerator-test-configuration diffusers (located at each end of the regenerator) are included. The report also includes recommendations for further development of involute-foil regenerators from a higher-temperature material than nickel.
Design and implementation of a magnetically suspended microrobotic pick-and-place system
NASA Astrophysics Data System (ADS)
Shameli, Ehsan; Craig, David G.; Khamesee, Mir Behrad
2006-04-01
Micromanipulation is an emerging technology in such diverse areas as precision engineering, microfabrication, and microsurgery. Each of these areas impose certain technological constraints and requirements in fabrication, actuation, and control. This paper performs a review on the latest technologies of microrobotic actuation techniques and suggests a suitable technique for the actuation of a magnetically levitated microrobot. The microrobot, suspended in an externally produced magnetic field, consists of a gripper attached to a series of permanent magnets and is capable of simple pick and place tasks. A number of electromagnets produce the external magnetic field and three laser sensors feedback the position of the levitated microrobot. Through finite element analysis, performance of the levitation system was investigated, and simulations and experiments were carried out to demonstrate the practical capabilities of the proposed system.
Scanning electrochemical microscopy (SECM) as a tool in biosensor research.
Stoica, Leonard; Neugebauer, Sebastian; Schuhmann, Wolfgang
2008-01-01
Scanning electrochemical microscopy (SECM) is discussed as a versatile tool to provide localized (electro)chemical information in the context of biosensor research. Advantages of localized electrochemical measurements will be discussed and a brief introduction to SECM and its operation modes will be given. Experimental challenges of the different detection modes of SECM and its applicability for different fields in biosensor research are discussed. Among these are the evaluation of immobilization techniques by probing the local distribution of biological activity, the visualization of diffusion profiles of reactants, cofactors, mediators, and products, and the elucidation of (local) kinetic parameters. The combination of SECM with other scanning-probe techniques allows to maximize the information on a given biosensing system. The potential of SECM as a tool in micro-fabrication aiming for the fabrication of microstructured biosensors will be shortly discussed.
Microfabricated capillary array electrophoresis device and method
Simpson, Peter C.; Mathies, Richard A.; Woolley, Adam T.
2000-01-01
A capillary array electrophoresis (CAE) micro-plate with an array of separation channels connected to an array of sample reservoirs on the plate. The sample reservoirs are organized into one or more sample injectors. One or more waste reservoirs are provided to collect wastes from reservoirs in each of the sample injectors. Additionally, a cathode reservoir is also multiplexed with one or more separation channels. To complete the electrical path, an anode reservoir which is common to some or all separation channels is also provided on the micro-plate. Moreover, the channel layout keeps the distance from the anode to each of the cathodes approximately constant.
Microfabricated capillary array electrophoresis device and method
Simpson, Peter C.; Mathies, Richard A.; Woolley, Adam T.
2004-06-15
A capillary array electrophoresis (CAE) micro-plate with an array of separation channels connected to an array of sample reservoirs on the plate. The sample reservoirs are organized into one or more sample injectors. One or more waste reservoirs are provided to collect wastes from reservoirs in each of the sample injectors. Additionally, a cathode reservoir is also multiplexed with one or more separation channels. To complete the electrical path, an anode reservoir which is common to some or all separation channels is also provided on the micro-plate. Moreover, the channel layout keeps the distance from the anode to each of the cathodes approximately constant.
NASA Technical Reports Server (NTRS)
Ibrahim, Mounir B.; Tew, Roy C.; Gedeon, David; Wood, Gary; McLean, Jeff
2008-01-01
Under Phase II of a NASA Research Award contract, a prototype nickel segmented-involute-foil regenerator was microfabricated via LiGA and tested in the NASA/Sunpower oscillating-flow test rig. The resulting figure-of-merit was about twice that of the approx.90% porosity random-fiber material currently used in the small 50-100 W Stirling engines recently manufactured for NASA. That work was reported at the 2007 International Energy Conversion Engineering Conference in St. Louis, was also published as a NASA report, NASA/TM-2007-2149731, and has been more completely described in a recent NASA Contractor Report, NASA/CR-2007-2150062. Under a scaled-back version of the original Phase III plan, a new nickel segmentedinvolute- foil regenerator was microfabricated and has been tested in a Sunpower Frequency-Test-Bed (FTB) Stirling convertor. Testing in the FTB convertor produced about the same efficiency as testing with the original random-fiber regenerator. But the high thermal conductivity of the prototype nickel regenerator was responsible for a significant performance degradation. An efficiency improvement (by a 1.04 factor, according to computer predictions) could have been achieved if the regenerator been made from a low-conductivity material. Also the FTB convertor was not reoptimized to take full advantage of the microfabricated regenerator's low flow resistance; thus the efficiency would likely have been even higher had the FTB been completely reoptimized. This report discusses the regenerator microfabrication process, testing of the regenerator in the Stirling FTB convertor, and the supporting analysis. Results of the pre-test computational fluid dynamics (CFD) modeling of the effects of the regenerator-test-configuration diffusers (located at each end of the regenerator) is included. The report also includes recommendations for accomplishing further development of involute-foil regenerators from a higher-temperature material than nickel.
Electrowetting for Digital Microfluidics
NASA Astrophysics Data System (ADS)
Hunt, Tom; Adamson, Kristi; Issadore, David; Westervelt, Robert
2006-03-01
Droplet based chemistry promises to greatly impact biomedical research, providing new avenues for high throughput, low volume assays such as drug screening. Electrowetting on Dielectric (EWOD) is an excellent technique for manipulating microscopic drops of liquid. EWOD uses buried electrodes to locally change the surface energy between a droplet and a substrate. We present microfabricated devices for moving droplets with EWOD. One example of such a device consists of a series of 16 interdigitated electrodes, decreasing in size from 1mm to 20 microns. Each electrode is addressable by an independent, computer controlled, high voltage supply. This work made possible by a gift from Phillip Morris and the NSEC NSF grant PHY-0117795.
Design and fabrication of a flexible substrate microelectrode array for brain machine interfaces.
Patrick, Erin; Ordonez, Matthew; Alba, Nicolas; Sanchez, Justin C; Nishida, Toshikazu
2006-01-01
We report a neural microelectrode array design that leverages the recording properties of conventional microwire electrode arrays with the additional features of precise control of the electrode geometries. Using microfabrication techniques, a neural probe array is fabricated that possesses a flexible polyimide-based cable. The performance of the design was tested with electrochemical impedance spectroscopy and in vivo studies. The gold-plated electrode site has an impedance value of 0.9 M Omega at 1 kHz. Acute neural recording provided high neuronal yields, peak-to-peak amplitudes (as high as 100 microV), and signal-to-noise ratios (27 dB).
Assembling a ring-shaped crystal in a microfabricated surface ion trap
Stick, Daniel Lynn; Tabakov, Boyan; Benito, Francisco; ...
2015-09-01
We report on experiments with a microfabricated surface trap designed for confining a chain of ions in a ring. Uniform ion separation over most of the ring is achieved with a rotationally symmetric design and by measuring and suppressing undesired electric fields. After reducing stray fields, the ions are confined primarily by a radio-frequency pseudopotential and their mutual Coulomb repulsion. As a result, approximately 400 40Ca + ions with an average separation of 9 μm comprise the ion crystal.
Assembling a ring-shaped crystal in a microfabricated surface ion trap
DOE Office of Scientific and Technical Information (OSTI.GOV)
Stick, Daniel Lynn; Tabakov, Boyan; Benito, Francisco
We report on experiments with a microfabricated surface trap designed for confining a chain of ions in a ring. Uniform ion separation over most of the ring is achieved with a rotationally symmetric design and by measuring and suppressing undesired electric fields. After reducing stray fields, the ions are confined primarily by a radio-frequency pseudopotential and their mutual Coulomb repulsion. As a result, approximately 400 40Ca + ions with an average separation of 9 μm comprise the ion crystal.
Simulation and Micro-Fabrication of Optically Switchable Split Ring Resonators
2007-01-01
Simulation and micro-fabrication of optically switchable split ring resonators T.F. Gundogdu a,*, Mutlu Gökkavas b, Kaan Güven b, M. Kafesaki a...mail address: tamara@iesl.forth.gr (T.F. Gundogdu ). 1569-4410/$ – see front matter # 2007 Published by Elsevier B.V. doi:10.1016/j.photonics...ABSTRACT unclassified c. THIS PAGE unclassified Standard Form 298 (Rev. 8-98) Prescribed by ANSI Std Z39-18 T.F. Gundogdu et al. / Photonics and
Early history and reactivation of the rand thrust, southern California
NASA Astrophysics Data System (ADS)
Postlethwaite, Clay E.; Jacobson, Carl E.
The Rand thrust of the Rand Mountains in the northwestern Mojave Desert separates an upper plate of quartz monzonite and quartzofeldspathic to amphibolitic gneiss from a lower plate of metagraywacke and mafic schist (Rand Schist). The Rand thrust is considered part of the regionally extensive Vincent/Chocolate Mountain thrust system, which is commonly believed to represent a Late Cretaceous subduction zone. The initial direction of dip and sense of movement along the Vincent/Chocolate Mountain thrust are controversial. Microfabrics of mylonites and quartzites from the Rand Mountains were analyzed in an attempt to determine transport direction for this region, but the results are ambiguous. In addition, the southwestern portion of the Rand thrust was found to have been reactivated as a low-angle normal fault after subduction. Reactivation might have occurred shortly after subduction, in which case it could account for the preservation of high-pressure mineral assemblages in the Rand Schist, or it could be related to mid-Tertiary extension in the western United States. In either event, the reactivation might be responsible for the complicated nature of the microfabrics. The Rand Schist exhibits an inverted metamorphic zonation. Isograds in the schist are not significantly truncated by the reactivated segment of the Rand thrust. This indicates that other segments of the Vincent/Chocolate Mountain thrust should be re-evaluated for the possibility of late movement, even if they show an apparently undisturbed inverted metamorphic zonation.
Takahashi, Hironobu; Okano, Teruo
2015-11-18
In some native tissues, appropriate microstructures, including orientation of the cell/extracellular matrix, provide specific mechanical and biological functions. For example, skeletal muscle is made of oriented myofibers that is responsible for the mechanical function. Native artery and myocardial tissues are organized three-dimensionally by stacking sheet-like tissues of aligned cells. Therefore, to construct any kind of complex tissue, the microstructures of cells such as myotubes, smooth muscle cells, and cardiomyocytes also need to be organized three-dimensionally just as in the native tissues of the body. Cell sheet-based tissue engineering allows the production of scaffold-free engineered tissues through a layer-by-layer construction technique. Recently, using microfabricated thermoresponsive substrates, aligned cells are being harvested as single continuous cell sheets. The cell sheets act as anisotropic tissue units to build three-dimensional tissue constructs with the appropriate anisotropy. This cell sheet-based technology is straightforward and has the potential to engineer a wide variety of complex tissues. In addition, due to the scaffold-free cell-dense environment, the physical and biological cell-cell interactions of these cell sheet constructs exhibit unique cell behaviors. These advantages will provide important clues to enable the production of well-organized tissues that closely mimic the structure and function of native tissues, required for the future of tissue engineering. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Hybrid membrane-microfluidic components using a novel ceramic MEMS technology
NASA Astrophysics Data System (ADS)
Lutz, Brent J.; Polyakov, Oleg; Rinaldo, Chris
2012-03-01
A novel hybrid nano/microfabrication technology has been employed to produce unique MEMS and microfluidic components that integrate nanoporous membranes. The components are made by micromachining a self-organized nanostructured ceramic material that is biocompatible and amenable to surface chemistry modification. Microfluidic structures, such as channels and wells, can be made with a precision of <2 microns. Thin-film membranes can be integrated into the bottom of these structures, featuring a wide range of possible thicknesses, from 100 micron to <50 nm. Additionally, these membranes may be non-porous or porous (with controllable pore sizes from 200 nm to <5 nm), for sophisticated size-based separations. With previous and current support from the NIH SBIR program, we have built several unique devices, and demonstrated improved separations, cell culturing, and imaging (optical and electron microscopy) versus standard products. Being ceramic, the material is much more robust to demanding environments (e.g. high and low temperatures and organic solvents), compared to polymer-based devices. Additionally, we have applied multiple surface modification techniques, including atomic layer deposition, to manipulate properties such as electrical conductivity. This microfabrication technology is highly scaleable, and thus can yield low-cost, reliable, disposable microcomponents and devices. Specific applications that can benefit from this technology includes cell culturing and assays, imaging by cryo-electron tomography, environmental sample processing, as well as many others.
Terahertz Response of a Microfabricated Rod Split-Ring-Resonator Electromagnetic Metamaterial
NASA Astrophysics Data System (ADS)
Moser, H. O.; Casse, B. D.; Wilhelmi, O.; Saw, B. T.
2005-02-01
The first electromagnetic metamaterials (EM3) produced by microfabrication are reported. They are based on the rod split-ring-resonator design as proposed by Pendry et al. [
A Scalable Microfabricated Ion Trap for Quantum Information Processing
NASA Astrophysics Data System (ADS)
Maunz, Peter; Haltli, Raymond; Hollowell, Andrew; Lobser, Daniel; Mizrahi, Jonathan; Rembetski, John; Resnick, Paul; Sterk, Jonathan D.; Stick, Daniel L.; Blain, Matthew G.
2016-05-01
Trapped Ion Quantum Information Processing (QIP) relies on complex microfabricated trap structures to enable scaling of the number of quantum bits. Building on previous demonstrations of surface-electrode ion traps, we have designed and characterized the Sandia high-optical-access (HOA-2) microfabricated ion trap. This trap features high optical access, high trap frequencies, low heating rates, and negligible charging of dielectric trap components. We have observed trap lifetimes of more than 100h, measured trap heating rates for ytterbium of less than 40quanta/s, and demonstrated shuttling of ions from a slotted to an above surface region and through a Y-junction. Furthermore, we summarize demonstrations of high-fidelity single and two-qubit gates realized in this trap. Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy's National Nuclear Security Administration under Contract DE-AC04-94AL85000. This work was supported by the Intelligence Advanced Research Projects Activity (IARPA).
DOE Office of Scientific and Technical Information (OSTI.GOV)
Ikhtiar,; Mitani, S.; Hono, K., E-mail: kazuhiro.hono@nims.go.jp
Heusler alloy-based lateral spin valves with ohmic contacts are prepared for the Co{sub 2}Fe(Ga{sub 0.5}Ge{sub 0.5})/Cu system by means of the top-down microfabrication process. The magneto-transport and microstructure are characterized to investigate the influence of the microfabrication route on the spin dependent transport of lateral spin valves systematically. A large non-local spin signal (△R{sub S}) of 17.3 mΩ is observed at room temperature, which is attributed to the highly spin-polarized Co{sub 2}Fe(Ga{sub 0.5}Ge{sub 0.5}) ferromagnet and the clean Co{sub 2}Fe(Ga{sub 0.5}Ge{sub 0.5})/Cu interfaces confirmed by transmission electron microscopy. Based on the general expression of one-dimensional spin diffusion model, we discuss themore » importance of interfacial spin polarization in Heusler alloy-based lateral spin valves.« less
Micro acoustic spectrum analyzer
Schubert, W. Kent; Butler, Michael A.; Adkins, Douglas R.; Anderson, Larry F.
2004-11-23
A micro acoustic spectrum analyzer for determining the frequency components of a fluctuating sound signal comprises a microphone to pick up the fluctuating sound signal and produce an alternating current electrical signal; at least one microfabricated resonator, each resonator having a different resonant frequency, that vibrate in response to the alternating current electrical signal; and at least one detector to detect the vibration of the microfabricated resonators. The micro acoustic spectrum analyzer can further comprise a mixer to mix a reference signal with the alternating current electrical signal from the microphone to shift the frequency spectrum to a frequency range that is a better matched to the resonant frequencies of the microfabricated resonators. The micro acoustic spectrum analyzer can be designed specifically for portability, size, cost, accuracy, speed, power requirements, and use in a harsh environment. The micro acoustic spectrum analyzer is particularly suited for applications where size, accessibility, and power requirements are limited, such as the monitoring of industrial equipment and processes, detection of security intrusions, or evaluation of military threats.
NASA Technical Reports Server (NTRS)
Hutt, L. D.; Glavin, D. P.; Bada, J. L.; Mathies, R. A.
1999-01-01
Chiral separations of fluorescein isothiocyanate-labeled amino acids have been performed on a microfabricated capillary electrophoresis chip to explore the feasibility of using such devices to analyze for extinct or extant life signs in extraterrestrial environments. The test system consists of a folded electrophoresis channel (19.0 cm long x 150 microns wide x 20 microns deep) that was photolithographically fabricated in a 10-cm-diameter glass wafer sandwich, coupled to a laser-excited confocal fluorescence detection apparatus providing subattomole sensitivity. Using a sodium dodecyl sulfate/gamma-cyclodextrin pH 10.0 carbonate electrophoresis buffer and a separation voltage of 550 V/cm at 10 degrees C, baseline resolution was observed for Val, Ala, Glu, and Asp enantiomers and Gly in only 4 min. Enantiomeric ratios were determined for amino acids extracted from the Murchison meteorite, and these values closely matched values determined by HPLC. These results demonstrate the feasibility of using microfabricated lab-on-a-chip systems to analyze extraterrestrial samples for amino acids.
Experimental Methods for Trapping Ions Using Microfabricated Surface Ion Traps
Hong, Seokjun; Lee, Minjae; Kwon, Yeong-Dae; Cho, Dong-il "Dan"; Kim, Taehyun
2017-01-01
Ions trapped in a quadrupole Paul trap have been considered one of the strong physical candidates to implement quantum information processing. This is due to their long coherence time and their capability to manipulate and detect individual quantum bits (qubits). In more recent years, microfabricated surface ion traps have received more attention for large-scale integrated qubit platforms. This paper presents a microfabrication methodology for ion traps using micro-electro-mechanical system (MEMS) technology, including the fabrication method for a 14 µm-thick dielectric layer and metal overhang structures atop the dielectric layer. In addition, an experimental procedure for trapping ytterbium (Yb) ions of isotope 174 (174Yb+) using 369.5 nm, 399 nm, and 935 nm diode lasers is described. These methodologies and procedures involve many scientific and engineering disciplines, and this paper first presents the detailed experimental procedures. The methods discussed in this paper can easily be extended to the trapping of Yb ions of isotope 171 (171Yb+) and to the manipulation of qubits. PMID:28872137
Electronic drop sensing in microfluidic devices: automated operation of a nanoliter viscometer
Srivastava, Nimisha; Burns, Mark A.
2007-01-01
We describe three droplet sensing techniques: a digital electrode, an analog electrode, and a thermal method. All three techniques use a single layer of metal lines that is easy to microfabricate and an electronic signal can be produced using low DC voltages. While the electrode methods utilize changes in electrical conductivity when the air/liquid interface of the droplet passes over a pair of electrodes, the thermal method is based on convective heat loss from a locally heated region. For the electrode method, the analog technique is able to detect 25 nL droplets while the digital technique is capable of detecting droplets as small as 100 pL. For thermal sensing, temperature profiles in the range of 36 °C and higher were used. Finally, we have used the digital electrode method and an array of electrodes located at preset distances to automate the operation of a previously described microfluidic viscometer. The viscometer is completely controlled by a laptop computer, and the total time for operation including setup, calibration, sample addition and viscosity calculation is approximately 4 minutes. PMID:16738725
Tissue strands as "bioink" for scale-up organ printing.
Yu, Yin; Ozbolat, Ibrahim T
2014-01-01
Organ printing, takes tissue spheroids as building blocks together with additive manufacturing technique to engineer tissue or organ replacement parts. Although a wide array of cell aggregation techniques has been investigated, and gained noticeable success, the application of tissue spheroids for scale-up tissue fabrication is still worth investigation. In this paper, we introduce a new micro-fabrication technique to create tissue strands at the scale of 500-700μm as a "bioink" for future robotic tissue printing. Printable alginate micro-conduits are used as semi-permeable capsules for tissue strand fabrication. Mouse insulinoma beta TC3 cell tissue strands were formed upon 4 days post fabrication with reasonable mechanical strength, high cell viability close to 90%, and tissue specific markers expression. Fusion was readily observed between strands when placing them together as early as 24h. Also, tissue strands were deposited with human umbilical vein smooth muscle cells (HUVSMCs) vascular conduits together to fabricated miniature pancreatic tissue analog. Our study provided a novel technique using tissue strands as "bioink" for scale-up bioprinting of tissues or organs.
NASA Astrophysics Data System (ADS)
Hentschel, Felix; Trepmann, Claudia
2015-04-01
Objective of this study is to elucidate the feldspar deformation behaviour at greenschist facies conditions relevant for the long-term rheological properties of continental crust. Uncertainties in models for the rheological properties are partly due to a poor knowledge of the deformation mechanisms taking place in granitoid rocks at inaccessible depth. The deformation behaviour of feldspar, the most abundant mineral in the continental crust, is characterized by an interaction of brittle, dissolution-precipitation and crystal-plastic processes, which is difficult to evaluate in experiments given the problematic extrapolation of experimental conditions to reasonable natural conditions. However, microfabrics of metamorphic granitoid rocks record the grain-scale deformation mechanisms and involved chemical reactions proceeding during their geological history. This usually includes deformation and modification through several stages in space (depth, i.e., P, T conditions) and/or time. For deciphering the rock's record this implies both, challenge and chance to resolve these different stages. Here, we use the deformation record of mylonitic pegmatites from the Austroalpine basement south to the western Tauern window. The structural, crystallographic and chemical characteristics of the feldspar microfabrics are determined via micro-analytical techniques (polarized light microscopy, scanning electron microscopy, SEM, electron back scatter diffraction, EBSD) to identify the relevant deformation mechanisms and deformation conditions. The pegmatites represent a relatively simple Ca-poor granitoid system, mineralogically dominated by albite-rich plagioclase, K-feldspar and quartz. The matrix of the mylonitic pegmatites is composed of alternating monomineralic albite and quartz ribbons defining the foliation. Fragmented tourmaline and K-feldspar porphyroclasts occur isolated within the matrix. At sites of dilation along the stretching lineation K-feldspar porphyroclasts show serrated boundaries to matrix albite grains. In intragranular zones within K-feldspar porphyroclasts, small albite but also K-feldspar grains and "subgrains" (K-feldspar domains with a small misorientation angle to the host K-feldspar porphyroclast) occur. Strain shadows around porphyroclasts are composed of polymineralic aggregates of albite, K-feldspar and quartz. The albite grains in ribbons show a shape preferred orientation (SPO) with a long axis of about 50-100 µm in the foliation plane and EBSD data reveal an absent to very weak crystallographic orientation (CPO). These microfabrics show indication of a sequence of brittle behaviour, localized dislocation glide-controlled deformation and dissolution-precipitation creep of feldspar. Monomineralic quartz ribbons and shear bands show evidence of dislocation glide by a pronounced CPO, implying dislocation creep. The microfabric is interpreted to have evolved during different stages of episodic deformation at transient high stresses with subsequent viscous flow at decreasing stresses.
NASA Astrophysics Data System (ADS)
Dandavino, S.; Ataman, C.; Ryan, C. N.; Chakraborty, S.; Courtney, D.; Stark, J. P. W.; Shea, H.
2014-07-01
Microfabricated electrospray thrusters could revolutionize the spacecraft industry by providing efficient propulsion capabilities to micro and nano satellites (1-100 kg). We present the modeling, design, fabrication and characterization of a new generation of devices, for the first time integrating in the fabrication process individual accelerator electrodes capable of focusing and accelerating the emitted sprays. Integrating these electrodes is a key milestone in the development of this technology; in addition to increasing the critical performance metrics of thrust, specific impulse and propulsive efficiency, the accelerators enable a number of new system features such as power tuning and thrust vectoring and balancing. Through microfabrication, we produced high density arrays (213 emitters cm-2) of capillary emitters, assembling them at wafer-level with an extractor/accelerator electrode pair separated by micro-sandblasted glass. Through IV measurements, we could confirm that acceleration could be decoupled from the extraction of the spray—an important element towards the flexibility of this technology. We present the largest reported internally fed microfabricated arrays operation, with 127 emitters spraying in parallel, for a total beam of 10-30 µA composed by 95% of ions. Effective beam focusing was also demonstrated, with plume half-angles being reduced from approximately 30° to 15° with 2000 V acceleration. Based on these results, we predict, with 3000 V acceleration, thrust per emitter of 38.4 nN, specific impulse of 1103 s and a propulsive efficiency of 22% with <1 mW/emitter power consumption.
Characterizing the Material Properties of Polymer-Based Microelectrode Arrays for Retinal Prosthesis
DOE Office of Scientific and Technical Information (OSTI.GOV)
Park, Christina Soyeun
2003-06-01
The Retinal Prosthesis project is a three year project conducted in part at the Lawrence Livermore National Laboratory and funded by the Department of Energy to create an epiretinal microelectrode array for stimulating retinal cells. The implant must be flexible to conform to the retina, robust to sustain handling during fabrication and implantation, and biocompatible to withstand physiological conditions within the eye. Using poly(dimethyl siloxane) (PDMS), LLNL aims to use microfabrication techniques to increase the number of electrodes and integrate electronics. After the initial designs were fabricated and tested in acute implantation, it became obvious that there was a needmore » to characterize and understand the mechanical and electrical properties of these new structures. This knowledge would be imperative in gaining credibility for polymer microfabrication and optimizing the designs. Thin composite microfabricated devices are challenging to characterize because they are difficult to handle, and exhibit non-linear, viscoelastic, and anisotropic properties. The objective of this research is to device experiments and protocols, develop an analytical model to represent the composite behavior, design and fabricate test structures, and conduct experimental testing to determine the mechanical and electrical properties of PDMS-metal composites. Previous uniaxial stretch tests show an average of 7% strain before failure on resistive heaters of similar dimensions deposited on PDMS. Lack of background information and questionable human accuracy demands a more sophisticated and thorough testing method. An Instron tensile testing machine was set up to interface with a digital multiplexor and computer interface to simultaneously record and graph position, load, and resistance across devices. With a compliant load cell for testing polymers and electrical interconnect grips designed and fabricated to interface the sample to the electronics, real-time resistance measurements were taken. Wafers of test structures were fabricated with variables such as lead width, pad to lead interface shape, PDMS thickness, metal (Ti and Au) thickness, and lead shape. Results showed that the serpentine shaped leads were 70% more effective, and that thicker adhesion layers of Ti were too brittle for testing. The other variables did not produce significant results.« less
3D printed polymers toxicity profiling: a caution for biodevice applications
NASA Astrophysics Data System (ADS)
Zhu, Feng; Skommer, Joanna; Friedrich, Timo; Kaslin, Jan; Wlodkowic, Donald
2015-12-01
A recent revolution in additive manufacturing technologies and access to 3D Computer Assisted Design (CAD) software has spurred an explosive growth of new technologies in biomedical engineering. This includes biomodels for diagnosis, surgical training, hard and soft tissue replacement, biodevices and tissue engineering. Moreover, recent developments in high-definition additive manufacturing systems such as Multi-Jet Modelling (MJM) and Stereolithography (SLA), capable of reproducing feature sizes close to 100 μm, promise brand new capabilities in fabrication of optical-grade biomicrofluidic Lab-on-a-Chip and MEMS devices. Compared with other rapid prototyping technologies such as soft lithography and infrared laser micromachining in PMMA, SLA and MJM systems can enable user-friendly production of prototypes, superior feature reproduction quality and comparable levels of optical transparency. Prospectively they can revolutionize fabrication of microfluidic devices with complex geometric features and eliminate the need to use clean room environment and conventional microfabrication techniques. In this work we demonstrate preliminary data on toxicity profiling of a panel of common polymers used in 3D printing applications. The main motivation of our work was to evaluate toxicity profiles of most commonly used polymers using standardized biotests according to OECD guidelines for testing of chemic risk assessment. Our work for the first time provides a multispecies view of potential dangers and limitation for building biocompatible devices using FDM, SLA and MJM additive manufacturing systems. Our work shows that additive manufacturing holds significant promise for fabricating LOC and MEMS but requires caution when selecting systems and polymers due to toxicity exhibited by some 3D printing polymers.
Microfabrication using soft lithography
NASA Astrophysics Data System (ADS)
Zhao, Xiao-Mei
Soft Lithography is a group of non-photolithographic techniques currently being explored in our group. Four such techniques-microcontact printing (μCP), replica molding (REM), micromolding in capillaries (MIMIC), and microtransfer molding (μTM)-have been demonstrated for fabricating micro- and nanostructures of a variety of materials with dimension >=30 nm. Part I (Chapters 1-5) reviews several aspects of the three molding techniques REM, MIMIC, and μTM. Chapters 1-3 describe μTM and MIMIC, and the use of these techniques in the fabrication of functional devices. μTM is capable of generating μm-scale structures over large areas, on both planar and contoured surfaces, and is able to make 3-dimensional structures layer by layer. The capability of μTM and MIMIC has been demonstrated in the fabrication of single-mode waveguides, waveguide couplers and interferometers. The coupling between waveguides can be tailored by waveguide spacing or the differential in curing time between the waveguides and the cladding. Chapters 4-5 demonstrate the combination of REM and shrinkable polystyrene (PS) films to reduce the feature size of microstructures and to generate microstructures with high aspect ratios on both planar and curved surfaces. A shrinkable PS film is patterned with relief structures, and then heated and shrinks. Thermal shrinkage results in a 100-fold increase in the aspect ratio of the patterned microstructures in the PS film. The microstructures in the shrunken PS films can be transferred to many other materials by REM. Part II (Chapters 6-7) focuses on two issues in the microfabrication using self-assembled monolayers (SAMs) as ultrathin resists. Chapter 6 describes a selective etching solution for transferring patterns of SAMs of alkanethiolates into the underlying layers (e.g., gold, silver, and copper). This etching solution uses thiosulfate as the ligand that coordinates to the metal ions, and ferricyanide as the oxidant. It has been demonstrated to be less toxic, more efficient, and provide fewer defects in the SAM-protected metallic regions upon etching. Chapter 7 describes a technique to measure the surface density of defects in SAMs of hexadecanethiolates on gold and in the structures prepared by using the SAMs as resists and the aqueous ferricyanide solution as the etchant, under conditions that may be encountered in lithographic processing. This technique uses two steps of amplification through chemical reaction to convert pinhole defects in SAMs into easily imaged, micron-scale pits in an underlying Si support.
Microfabrication of three-dimensional filters for liposome extrusion
NASA Astrophysics Data System (ADS)
Baldacchini, Tommaso; Nuñez, Vicente; LaFratta, Christopher N.; Grech, Joseph S.; Vullev, Valentine I.; Zadoyan, Ruben
2015-03-01
Liposomes play a relevant role in the biomedical field of drug delivery. The ability of these lipid vesicles to encapsulate and transport a variety of bioactive molecules has fostered their use in several therapeutic applications, from cancer treatments to the administration of drugs with antiviral activities. Size and uniformity are key parameters to take into consideration when preparing liposomes; these factors greatly influence their effectiveness in both in vitro and in vivo experiments. A popular technique employed to achieve the optimal liposome dimension (around 100 nm in diameter) and uniform size distribution is repetitive extrusion through a polycarbonate filter. We investigated two femtosecond laser direct writing techniques for the fabrication of three-dimensional filters within a microfluidics chip for liposomes extrusion. The miniaturization of the extrusion process in a microfluidic system is the first step toward a complete solution for lab-on-a-chip preparation of liposomes from vesicles self-assembly to optical characterization.
Micro thrust and heat generator
Garcia, Ernest J.
1998-01-01
A micro thrust and heat generator has a means for providing a combustion fuel source to an ignition chamber of the micro thrust and heat generator. The fuel is ignited by a ignition means within the micro thrust and heat generator's ignition chamber where it burns and creates a pressure. A nozzle formed from the combustion chamber extends outward from the combustion chamber and tappers down to a narrow diameter and then opens into a wider diameter where the nozzle then terminates outside of said combustion chamber. The pressure created within the combustion chamber accelerates as it leaves the chamber through the nozzle resulting in pressure and heat escaping from the nozzle to the atmosphere outside the micro thrust and heat generator. The micro thrust and heat generator can be microfabricated from a variety of materials, e.g., of polysilicon, on one wafer using surface micromachining batch fabrication techniques or high aspect ratio micromachining techniques (LIGA).
Micro thrust and heat generator
Garcia, E.J.
1998-11-17
A micro thrust and heat generator have a means for providing a combustion fuel source to an ignition chamber of the micro thrust and heat generator. The fuel is ignited by a ignition means within the micro thrust and heat generator`s ignition chamber where it burns and creates a pressure. A nozzle formed from the combustion chamber extends outward from the combustion chamber and tappers down to a narrow diameter and then opens into a wider diameter where the nozzle then terminates outside of said combustion chamber. The pressure created within the combustion chamber accelerates as it leaves the chamber through the nozzle resulting in pressure and heat escaping from the nozzle to the atmosphere outside the micro thrust and heat generator. The micro thrust and heat generator can be microfabricated from a variety of materials, e.g., of polysilicon, on one wafer using surface micromachining batch fabrication techniques or high aspect ratio micromachining techniques (LIGA). 30 figs.
Development of a Photothermal Absorbance Detector for Use with Microfluidic Devices
Dennis, Patty J.; Ferguson Welch, Erin R.; Alarie, Jean Pierre; Ramsey, J. Michael; Jorgenson, James W.
2010-01-01
The development of a photothermal absorbance detector for use with microfluidic devices is described. Unlike thermooptical techniques that rely on measuring refractive index changes, the solution viscosity is probed by continuously monitoring solution conductivity. Platinum electrodes microfabricated on a quartz substrate and bonded to a substrate containing the microchannels enable contact conductivity measurements. The effects of excitation frequency and voltage, electrode spacing, laser power, and laser modulation (chopping) frequency were evaluated experimentally. In the current configuration a limit of detection of 5 nM for DABSYL-tagged glucosamine was obtained using long injections (to give flat-topped peaks). This corresponds to an absorbance of 4.4 × 10−7 AU. Separation and detection of DABSYL-tagged glycine, proline, and tryptophan is also shown to demonstrate the feasibility of the method. In addition, simulations were used to investigate the applicability of the technique to small volume platforms. PMID:20411923
Microfabricated, flowthrough porous apparatus for discrete detection of binding reactions
Beattie, Kenneth L.
1998-01-01
An improved microfabricated apparatus for conducting a multiplicity of individual and simultaneous binding reactions is described. The apparatus comprises a substrate on which are located discrete and isolated sites for binding reactions. The apparatus is characterized by discrete and isolated regions that extend through said substrate and terminate on a second surface thereof such that when a test sample is allowed to the substrate, it is capable of penetrating through each such region during the course of said binding reaction. The apparatus is especially useful for sequencing by hybridization of DNA molecules.
Trends in Microfabrication Capabilities & Device Architectures.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Bauer, Todd; Jones, Adam; Lentine, Anthony L.
The last two decades have seen an explosion in worldwide R&D, enabling fundamentally new capabilities while at the same time changing the international technology landscape. The advent of technologies for continued miniaturization and electronics feature size reduction, and for architectural innovations, will have many technical, economic, and national security implications. It is important to anticipate possible microelectronics development directions and their implications on US national interests. This report forecasts and assesses trends and directions for several potentially disruptive microfabrication capabilities and device architectures that may emerge in the next 5-10 years.
Microfabricated optically pumped magnetometer arrays for biomedical imaging
NASA Astrophysics Data System (ADS)
Perry, A. R.; Sheng, D.; Krzyzewski, S. P.; Geller, S.; Knappe, S.
2017-02-01
Optically-pumped magnetometers have demonstrated magnetic field measurements as precise as the best superconducting quantum interference device magnetometers. Our group develops miniature alkali atom-based magnetic sensors using microfabrication technology. Our sensors do not require cryogenic cooling, and can be positioned very close to the sample, making these sensors an attractive option for development in the medical community. We will present our latest chip-scale optically-pumped gradiometer developed for array applications to image magnetic fields from the brain noninvasively. These developments should lead to improved spatial resolution, and potentially sensitive measurements in unshielded environments.
Micro- and nanotechnology in cardiovascular tissue engineering.
Zhang, Boyang; Xiao, Yun; Hsieh, Anne; Thavandiran, Nimalan; Radisic, Milica
2011-12-09
While in nature the formation of complex tissues is gradually shaped by the long journey of development, in tissue engineering constructing complex tissues relies heavily on our ability to directly manipulate and control the micro-cellular environment in vitro. Not surprisingly, advancements in both microfabrication and nanofabrication have powered the field of tissue engineering in many aspects. Focusing on cardiac tissue engineering, this paper highlights the applications of fabrication techniques in various aspects of tissue engineering research: (1) cell responses to micro- and nanopatterned topographical cues, (2) cell responses to patterned biochemical cues, (3) controlled 3D scaffolds, (4) patterned tissue vascularization and (5) electromechanical regulation of tissue assembly and function.
Replaceable Microfluidic Cartridges for a PCR Biosensor
NASA Technical Reports Server (NTRS)
Francis, Kevin; Sullivan, Ron
2005-01-01
The figure depicts a replaceable microfluidic cartridge that is a component of a miniature biosensor that detects target deoxyribonucleic acid (DNA) sequences. The biosensor utilizes (1) polymerase chain reactions (PCRs) to multiply the amount of DNA to be detected, (2) fluorogenic polynucleotide probe chemicals for labeling the target DNA sequences, and (3) a high-sensitivity epifluorescence-detection optoelectronic subsystem. Microfluidics is a relatively new field of device development in which one applies techniques for fabricating microelectromechanical systems (MEMS) to miniature systems for containing and/or moving fluids. Typically, microfluidic devices are microfabricated, variously, from silicon or polymers. The development of microfluidic devices for applications that involve PCR and fluorescence-based detection of PCR products poses special challenges
Total-Internal-Reflection Platforms for Chemical and Biological Sensing Applications
NASA Astrophysics Data System (ADS)
Sapsford, Kim E.
Sensing platforms based on the principle of total internal reflection (TIR) represent a fairly mature yet still expanding and exciting field of research. Sensor development has mainly been driven by the need for rapid, stand-alone, automated devices for application in the fields of clinical diagnosis and screening, food and water safety, environmental monitoring, and chemical and biological warfare agent detection. The technologies highlighted in this chapter are continually evolving, taking advantage of emerging advances in microfabrication, lab-on-a-chip, excitation, and detection techniques. This chapter describes many of the underlying principles of TIR-based sensing platforms and additionally focusses on planar TIR fluorescence (TIRF)-based chemical and biological sensors.
Vertically aligned multiwalled carbon nanotubes for pressure, tactile and vibration sensing.
Yilmazoglu, O; Popp, A; Pavlidis, D; Schneider, J J; Garth, D; Schüttler, F; Battenberg, G
2012-03-02
We report a simple method for the micro-nano integration of flexible, vertically aligned multiwalled CNT arrays sandwiched between a top and bottom carbon layer via a porous alumina (Al(2)O(3)) template approach. The electromechanical properties of the flexible CNT arrays have been investigated under mechanical stress conditions. First experiments show highly sensitive piezoresistive sensors with a resistance decrease of up to ∼35% and a spatial resolution of <1 mm. The results indicate that these CNT structures can be utilized for tactile sensing components. They also confirm the feasibility of accessing and utilizing nanoscopic CNT bundles via lithographic processing. The method involves room-temperature processing steps and standard microfabrication techniques.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Queen, J.H.; Rizer, W.D.
1990-07-10
A significant body of published work has developed establishing fracture-related seismic anisotropy as an observable effect. To further the understanding of seismic birefringence techniques in characterizing natural fracture systems at depth, an integrated program of seismic and geologic measurements has been conducted at Conoco's Borehole Test Facility in Kay County, Oklahoma. Birefringence parameters inferred from the seismic data are consistent with a vertical fracture model of density 0.04 striking east-northeast. That direction is subparallel to a fracture set mapped both on the surface and from subsurface data, to the in situ maximum horizontal stress, and to the inferred microfabric.
Self-Cleaning Surfaces Prepared By Microstructuring System
NASA Astrophysics Data System (ADS)
Sabbah, Abbas; Vandeparre, H.; Brau, F.; Damman, P.
The wettability of materials is a very important aspect of surface science governed by the chemical composition of the surface and its morphology. In this context, materials replicating nature's superhydrophobic surfaces, such as lotus leafs, rose petals and butterfly wings, have widely attracted attention of physicists and material engineers [1-3]. Despite of considerable efforts during the last decade, superhydrophobic surfaces are still expensive and usually involved microfabrication processes, such as photolithography technique. In this study, we propose an original and simple method to create superhydrophobic surfaces by controling elastic instabilities [4-8]. Indeed, we demonstrate that the self-organization of wrinkles on top of non-wettable polymer surfaces leads to surperhydrophobic surfaces.
Dense arrays of millimeter-sized glass lenses fabricated at wafer-level.
Albero, Jorge; Perrin, Stéphane; Bargiel, Sylwester; Passilly, Nicolas; Baranski, Maciej; Gauthier-Manuel, Ludovic; Bernard, Florent; Lullin, Justine; Froehly, Luc; Krauter, Johann; Osten, Wolfgang; Gorecki, Christophe
2015-05-04
This paper presents the study of a fabrication technique of lenses arrays based on the reflow of glass inside cylindrical silicon cavities. Lenses whose sizes are out of the microfabrication standards are considered. In particular, the case of high fill factor arrays is discussed in detail since the proximity between lenses generates undesired effects. These effects, not experienced when lenses are sufficiently separated so that they can be considered as single items, are corrected by properly designing the silicon cavities. Complete topographic as well as optical characterizations are reported. The compatibility of materials with Micro-Opto-Electromechanical Systems (MOEMS) integration processes makes this technology attractive for the miniaturization of inspection systems, especially those devoted to imaging.
Collective cell migration: a physics perspective
NASA Astrophysics Data System (ADS)
Hakim, Vincent; Silberzan, Pascal
2017-07-01
Cells have traditionally been viewed either as independently moving entities or as somewhat static parts of tissues. However, it is now clear that in many cases, multiple cells coordinate their motions and move as collective entities. Well-studied examples comprise development events, as well as physiological and pathological situations. Different ex vivo model systems have also been investigated. Several recent advances have taken place at the interface between biology and physics, and have benefitted from progress in imaging and microscopy, from the use of microfabrication techniques, as well as from the introduction of quantitative tools and models. We review these interesting developments in quantitative cell biology that also provide rich examples of collective out-of-equilibrium motion.
Monolithic microfabricated valves and pumps by multilayer soft lithography.
Unger, M A; Chou, H P; Thorsen, T; Scherer, A; Quake, S R
2000-04-07
Soft lithography is an alternative to silicon-based micromachining that uses replica molding of nontraditional elastomeric materials to fabricate stamps and microfluidic channels. We describe here an extension to the soft lithography paradigm, multilayer soft lithography, with which devices consisting of multiple layers may be fabricated from soft materials. We used this technique to build active microfluidic systems containing on-off valves, switching valves, and pumps entirely out of elastomer. The softness of these materials allows the device areas to be reduced by more than two orders of magnitude compared with silicon-based devices. The other advantages of soft lithography, such as rapid prototyping, ease of fabrication, and biocompatibility, are retained.
Miniature Trace Gas Detector Based on Microfabricated Optical Resonators
NASA Technical Reports Server (NTRS)
Aveline, David C.; Yu, Nan; Thompson, Robert J.; Strekalov, Dmitry V.
2013-01-01
While a variety of techniques exist to monitor trace gases, methods relying on absorption of laser light are the most commonly used in terrestrial applications. Cavity-enhanced absorption techniques typically use high-reflectivity mirrors to form a resonant cavity, inside of which a sample gas can be analyzed. The effective absorption length is augmented by the cavity's high quality factor, or Q, because the light reflects many times between the mirrors. The sensitivity of such mirror-based sensors scales with size, generally making them somewhat bulky in volume. Also, specialized coatings for the high-reflectivity mirrors have limited bandwidth (typically just a few nanometers), and the delicate mirror surfaces can easily be degraded by dust or chemical films. As a highly sensitive and compact alternative, JPL is developing a novel trace gas sensor based on a monolithic optical resonator structure that has been modified such that a gas sample can be directly injected into the cavity. This device concept combines ultra-high Q optical whispering gallery mode resonators (WGMR) with microfabrication technology used in the semiconductor industry. For direct access to the optical mode inside a resonator, material can be precisely milled from its perimeter, creating an open gap within the WGMR. Within this open notch, the full optical mode of the resonator can be accessed. While this modification may limit the obtainable Q, calculations show that the reduction is not significant enough to outweigh its utility for trace gas detection. The notch can be milled from the high- Q crystalline WGMR with a focused ion beam (FIB) instrument with resolution much finer than an optical wavelength, thereby minimizing scattering losses and preserving the optical quality. Initial experimental demonstrations have shown that these opened cavities still support high-Q whispering gallery modes. This technology could provide ultrasensitive detection of a variety of molecular species in an extremely compact and robust package. With this type of modified WGMR, one can inject a gas sample into the open gap, allowing highly sensitive trace molecule detection within a roughly 1-cm volume. Other critical components of the instrument, such as the detector and a semiconductor laser, could be directly packaged with the resonator so as to not significantly increase the size of the device. Besides its low mass, volume, and power consumption, the monolithic design makes these resonators intrinsically robust devices, capable of handling significant temperature excursions, without moving parts to wear out or delicate coatings that can be easily damaged. A sensor could integrate with microfluidics technology for a chip-scale device. It could be mounted to the end of a deployable arm, or inserted into a borehole. Also, a network of individual sensors could be dispersed to monitor conditions over a wide region
Design and Characterization of a Microfabricated Hydrogen Clearance Blood Flow Sensor
Walton, Lindsay R.; Edwards, Martin A.; McCarty, Gregory S.; Wightman, R. Mark
2016-01-01
Background Modern cerebral blood flow (CBF) detection favors the use of either optical technologies that are limited to cortical brain regions, or expensive magnetic resonance. Decades ago, inhalation gas clearance was the choice method of quantifying CBF, but this suffered from poor temporal resolution. Electrolytic H2 clearance (EHC) generates and collects gas in situ at an electrode pair, which improves temporal resolution, but the probe size has prohibited meaningful subcortical use. New Method We microfabricated EHC electrodes to an order of magnitude smaller than those existing, on the scale of 100 µm, to permit use deep within the brain. Results Novel EHC probes were fabricated. The devices offered exceptional signal-to-noise, achieved high collection efficiencies (40 – 50%) in vitro, and agreed with theoretical modeling. An in vitro chemical reaction model was used to confirm that our devices detected flow rates higher than those expected physiologically. Computational modeling that incorporated realistic noise levels demonstrated devices would be sensitive to physiological CBF rates. Comparison with Existing Method The reduced size of our arrays makes them suitable for subcortical EHC measurements, as opposed to the larger, existing EHC electrodes that would cause substantial tissue damage. Our array can collect multiple CBF measurements per minute, and can thus resolve physiological changes occurring on a shorter timescale than existing gas clearance measurements. Conclusion We present and characterize microfabricated EHC electrodes and an accompanying theoretical model to interpret acquired data. Microfabrication allows for the high-throughput production of reproducible devices that are capable of monitoring deep brain CBF with sub-minute resolution. PMID:27102042
TOPICAL REVIEW: Microsystem technologies for implantable applications
NASA Astrophysics Data System (ADS)
Receveur, Rogier A. M.; Lindemans, Fred W.; de Rooij, Nicolaas F.
2007-05-01
Microsystem technologies (MST) have become the basis of a large industry. The advantages of MST compared to other technologies provide opportunities for application in implantable biomedical devices. This paper presents a general and broad literature review of MST for implantable applications focused on the technical domain. A classification scheme is introduced to order the examples, basic technological building blocks relevant for implantable applications are described and finally a case study on the role of microsystems for one clinical condition is presented. We observe that the microfabricated parts span a wide range for implantable applications in various clinical areas. There are 94 active and 67 commercial 'end items' out of a total of 142. End item refers to the total concept, of which the microsystem may only be a part. From the 105 active end items 18 (13% of total number of end items) are classified as products. From these 18 products, there are only two for chronic use. The number of active end items in clinical, animal and proto phase for chronic use is 17, 13 and 20, respectively. The average year of first publication of chronic end items that are still in the animal or clinical phase is 1994 (n = 7) and 1993 (n = 11), respectively. The major technology market combinations are sensors for cardiovascular, drug delivery for drug delivery and electrodes for neurology and ophthalmology. Together these form 51% of all end items. Pressure sensors form the majority of sensors and there is just one product (considered to be an implantable microsystem) in the neurological area. Micro-machined ceramic packages, glass sealed packages and polymer encapsulations are used. Glass to metal seals are used for feedthroughs. Interconnection techniques such as flip chip, wirebonding or conductive epoxy as used in the semiconductor packaging and assembly industry are also used for manufacturing of implantable devices. Coatings are polymers or metal. As an alternative to implantable primary batteries, rechargeable batteries were introduced or concepts in which energy is provided from the outside based on inductive coupling. Long-term developments aiming at autonomous power are, for example, based on electrostatic conversion of mechanical vibrations. Communication with the implantable device is usually done using an inductive link. A large range of materials commonly used in microfabrication are also used for implantable microsystems.
Kuo, Chien-Wei
2017-01-01
Wear particle-induced biological responses are the major factors resulting in the loosening and then failure of total joint arthroplasties. It is feasible to improve the lubrication and reduce the wear of artificial joint system. Polyetheretherketone (PEEK) is considered as a potential bearing material due to its mechanical characteristics of resistance to fatigue strain. The PEEK wear particles have been indicated to be involved in biological responses in vitro, and further studies regarding the wear phenomena and wear particle generation are needed. In this study, we have established an accelerated wear testing system with microfabricated surfaces. Various contact pressures and lubricants have been utilized in the accelerated wear tests. Our results showed that increasing contact pressure resulted in an increase of wear particle sizes and wear rate, and the size of PEEK wear particles can be controlled by the feature size of microfabricated surfaces. These results provided the information rapidly about factors that affect the morphology and amount of PEEK wear particles and can be applied in the future for application of PEEK on the biological articulation system. PMID:29230411
Parylene C coating for high-performance replica molding.
Heyries, Kevin A; Hansen, Carl L
2011-12-07
This paper presents an improvement to the soft lithography fabrication process that uses chemical vapor deposition of poly(chloro-p-xylylene) (parylene C) to protect microfabricated masters and to improve the release of polymer devices following replica molding. Chemical vapor deposition creates nanometre thick conformal coatings of parylene C on silicon wafers having arrays of 30 μm high SU8 pillars with densities ranging from 278 to 10,040 features per mm(2) and aspect ratios (height : width) from 1 : 1 to 6 : 1. A single coating of parylene C was sufficient to permanently promote poly(dimethyl)siloxane (PDMS) mold release and to protect masters for an indefinite number of molding cycles. We also show that the improved release properties of parylene treated masters allow for fabrication with hard polymers, such as poly(urethane), that would otherwise not be compatible with SU8 on silicon masters. Parylene C provides a robust and high performance mold release coating for soft lithography microfabrication that extends the life of microfabricated masters and improves the achievable density and aspect ratio of replicated features.
NASA Astrophysics Data System (ADS)
Almazán, Fernando; Pellejero, Ismael; Morales, Alberto; Urbiztondo, Miguel A.; Sesé, Javier; Pina, M. Pilar; Santamaría, Jesús
2016-08-01
A novel 6-step microfabrication process is proposed in this work to prepare microfluidic devices with integrated zeolite layers. In particular, microfabricated preconcentrators designed for volatile organic compounds (VOC) sensing applications are fully described. The main novelty of this work is the integration of the pure siliceous MFI type zeolite (silicalite-1) polycrystalline layer, i.e. 4.0 ± 0.5 μm thick, as active phase, within the microfabrication process just before the anodic bonding step. Following this new procedure, Si microdevices with an excellent distribution of the adsorbent material, integrated resistive heaters and Pyrex caps have been obtained. Firstly, the microconcentrator performance has been assessed by means of the normal hexane breakthrough curves as a function of sampling and desorption flowrates, temperature and micropreconcentrator design. In a step further, the best preconcentrator device has been tested in combination with downstream Si based microcantilevers deployed as VOC detectors. Thus, a preliminar evaluation of the improvement on detection sensitivity by silicalite-1 based microconcentrators is presented.
Su, Chen-Ying; Kuo, Chien-Wei; Fang, Hsu-Wei
2017-01-01
Wear particle-induced biological responses are the major factors resulting in the loosening and then failure of total joint arthroplasties. It is feasible to improve the lubrication and reduce the wear of artificial joint system. Polyetheretherketone (PEEK) is considered as a potential bearing material due to its mechanical characteristics of resistance to fatigue strain. The PEEK wear particles have been indicated to be involved in biological responses in vitro, and further studies regarding the wear phenomena and wear particle generation are needed. In this study, we have established an accelerated wear testing system with microfabricated surfaces. Various contact pressures and lubricants have been utilized in the accelerated wear tests. Our results showed that increasing contact pressure resulted in an increase of wear particle sizes and wear rate, and the size of PEEK wear particles can be controlled by the feature size of microfabricated surfaces. These results provided the information rapidly about factors that affect the morphology and amount of PEEK wear particles and can be applied in the future for application of PEEK on the biological articulation system.
Microfabricated Chemical Gas Sensors and Sensor Arrays for Aerospace Applications
NASA Technical Reports Server (NTRS)
Hunter, Gary W.
2005-01-01
Aerospace applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. In particular, factors such as minimal sensor size, weight, and power consumption are particularly important. Development areas which have potential aerospace applications include launch vehicle leak detection, engine health monitoring, and fire detection. Sensor development for these applications is based on progress in three types of technology: 1) Micromachining and microfabrication (Microsystem) technology to fabricate miniaturized sensors; 2) The use of nanocrystalline materials to develop sensors with improved stability combined with higher sensitivity; 3) The development of high temperature semiconductors, especially silicon carbide. This presentation discusses the needs of space applications as well as the point-contact sensor technology and sensor arrays being developed to address these needs. Sensors to measure hydrogen, hydrocarbons, nitrogen oxides (NO,), carbon monoxide, oxygen, and carbon dioxide are being developed as well as arrays for leak, fire, and emissions detection. Demonstrations of the technology will also be discussed. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.
Cell-microenvironment interactions and architectures in microvascular systems
Bersini, Simone; Yazdi, Iman K.; Talò, Giuseppe; Shin, Su Ryon; Moretti, Matteo; Khademhosseini, Ali
2016-01-01
In the past decade, significant advances have been made in the design and optimization of novel biomaterials and microfabrication techniques to generate vascularized tissues. Novel microfluidic systems have facilitated the development and optimization of in vitro models for exploring the complex pathophysiological phenomena that occur inside a microvascular environment. To date, most of these models have focused on engineering of increasingly complex systems, rather than analyzing the molecular and cellular mechanisms that drive microvascular network morphogenesis and remodeling. In fact, mutual interactions among endothelial cells (ECs), supporting mural cells and organ-specific cells, as well as between ECs and the extracellular matrix, are key driving forces for vascularization. This review focuses on the integration of materials science, microengineering and vascular biology for the development of in vitro microvascular systems. Various approaches currently being applied to study cell-cell/cell-matrix interactions, as well as biochemical/biophysical cues promoting vascularization and their impact on microvascular network formation, will be identified and discussed. Finally, this review will explore in vitro applications of microvascular systems, in vivo integration of transplanted vascularized tissues, and the important challenges for vascularization and controlling the microcirculatory system within the engineered tissues, especially for microfabrication approaches. It is likely that existing models and more complex models will further our understanding of the key elements of vascular network growth, stabilization and remodeling to translate basic research principles into functional, vascularized tissue constructs for regenerative medicine applications, drug screening and disease models. PMID:27417066
Cell-microenvironment interactions and architectures in microvascular systems.
Bersini, Simone; Yazdi, Iman K; Talò, Giuseppe; Shin, Su Ryon; Moretti, Matteo; Khademhosseini, Ali
2016-11-01
In the past decade, significant advances have been made in the design and optimization of novel biomaterials and microfabrication techniques to generate vascularized tissues. Novel microfluidic systems have facilitated the development and optimization of in vitro models for exploring the complex pathophysiological phenomena that occur inside a microvascular environment. To date, most of these models have focused on engineering of increasingly complex systems, rather than analyzing the molecular and cellular mechanisms that drive microvascular network morphogenesis and remodeling. In fact, mutual interactions among endothelial cells (ECs), supporting mural cells and organ-specific cells, as well as between ECs and the extracellular matrix, are key driving forces for vascularization. This review focuses on the integration of materials science, microengineering and vascular biology for the development of in vitro microvascular systems. Various approaches currently being applied to study cell-cell/cell-matrix interactions, as well as biochemical/biophysical cues promoting vascularization and their impact on microvascular network formation, will be identified and discussed. Finally, this review will explore in vitro applications of microvascular systems, in vivo integration of transplanted vascularized tissues, and the important challenges for vascularization and controlling the microcirculatory system within the engineered tissues, especially for microfabrication approaches. It is likely that existing models and more complex models will further our understanding of the key elements of vascular network growth, stabilization and remodeling to translate basic research principles into functional, vascularized tissue constructs for regenerative medicine applications, drug screening and disease models. Copyright © 2016 Elsevier Inc. All rights reserved.
A polarization converting device for an interfering enhanced CPT atomic clock.
Wang, Kewei; Tian, Yuan; Yin, Yi; Wang, Yuanchao; Gu, Sihong
2017-11-01
With interfering enhanced coherent population trapping (CPT) signals, a CPT atomic clock with improved frequency stability performance can be realized. We explore an optical device that converts single-polarized bichromatic light to left and right circularly polarized superposed bichromatic light to generate interfering enhanced CPT resonance with atoms. We have experimentally studied a tabletop CPT atomic clock apparatus with a microfabricated 87 Rb atomic chip-scale cell, and the study results show that it is promising to realize a compact CPT atomic clock, even a chip-scale CPT atomic clock through microfabrication, with improved frequency stability performance.
Cavalli, Gabriel; Banu, Shahanara; Ranasinghe, Rohan T; Broder, Graham R; Martins, Hugo F P; Neylon, Cameron; Morgan, Hywel; Bradley, Mark; Roach, Peter L
2007-01-01
SU-8 is an epoxy-novolac resin and a well-established negative photoresist for microfabrication and microengineering. The photopolymerized resist is an extremely highly crosslinked polymer showing outstanding chemical and physical robustness with residual surface epoxy groups amenable for chemical functionalization. In this paper we describe, for the first time, the preparation and surface modification of SU-8 particles shaped as microbars, the attachment of appropriate linkers, and the successful application of these particles to multistep solid-phase synthesis leading to oligonucleotides and peptides attached in an unambiguous manner to the support surface.
Microfabrication of hybrid fluid membrane for microengines
NASA Astrophysics Data System (ADS)
Chutani, R.; Formosa, F.; de Labachelerie, M.; Badel, A.; Lanzetta, F.
2015-12-01
This paper describes the microfabrication and dynamic characterization of thick membranes providing a technological solution for microengines. The studied membranes are called hybrid fluid-membrane (HFM) and consist of two thin membranes that encapsulate an incompressible fluid. This work details the microelectromechanical system (MEMS) scalable fabrication and characterization of HFMs. The membranes are composite structures based on Silicon spiral springs embedded in a polymer (RTV silicone). The anodic bonding of multiple stacks of Si/glass structures, the fluid filling and the sealing have been demonstrated. Various HFMs were successfully fabricated and their dynamic characterization demonstrates the agreement between experimental and theoretical results.
Enhanced adhesion for LIGA microfabrication by using a buffer layer
Bajikar, Sateesh S.; De Carlo, Francesco; Song, Joshua J.
2004-01-27
The present invention is an improvement on the LIGA microfabrication process wherein a buffer layer is applied to the upper or working surface of a substrate prior to the placement of a resist onto the surface of the substrate. The buffer layer is made from an inert low-Z material (low atomic weight), a material that absorbs secondary X-rays emissions from the substrate that are generated from the substrate upon exposure to a primary X-rays source. Suitable materials for the buffer layer include polyamides and polyimide. The preferred polyimide is synthesized form pyromellitic anhydride and oxydianiline (PMDA-ODA).
A polarization converting device for an interfering enhanced CPT atomic clock
NASA Astrophysics Data System (ADS)
Wang, Kewei; Tian, Yuan; Yin, Yi; Wang, Yuanchao; Gu, Sihong
2017-11-01
With interfering enhanced coherent population trapping (CPT) signals, a CPT atomic clock with improved frequency stability performance can be realized. We explore an optical device that converts single-polarized bichromatic light to left and right circularly polarized superposed bichromatic light to generate interfering enhanced CPT resonance with atoms. We have experimentally studied a tabletop CPT atomic clock apparatus with a microfabricated 87Rb atomic chip-scale cell, and the study results show that it is promising to realize a compact CPT atomic clock, even a chip-scale CPT atomic clock through microfabrication, with improved frequency stability performance.
Enhanced adhesion for LIGA microfabrication by using a buffer layer
Bajikar, Sateesh S.; De Carlo, Francesco; Song, Joshua J.
2001-01-01
The present invention is an improvement on the LIGA microfabrication process wherein a buffer layer is applied to the upper or working surface of a substrate prior to the placement of a resist onto the surface of the substrate. The buffer layer is made from an inert low-Z material (low atomic weight), a material that absorbs secondary X-rays emissions from the substrate that are generated from the substrate upon exposure to a primary X-rays source. Suitable materials for the buffer layer include polyamides and polyimide. The preferred polyimide is synthesized form pyromellitic anhydride and oxydianiline (PMDA-ODA).
Manginell, Ronald P [Albuquerque, NM; Bunker, Bruce C [Albuquerque, NM; Huber, Dale L [Albuquerque, NM
2008-09-09
A biological preconcentrator comprises a stimulus-responsive active film on a stimulus-producing microfabricated platform. The active film can comprise a thermally switchable polymer film that can be used to selectively absorb and desorb proteins from a protein mixture. The biological microfabricated platform can comprise a thin membrane suspended on a substrate with an integral resistive heater and/or thermoelectric cooler for thermal switching of the active polymer film disposed on the membrane. The active polymer film can comprise hydrogel-like polymers, such as poly(ethylene oxide) or poly(n-isopropylacrylamide), that are tethered to the membrane. The biological preconcentrator can be fabricated with semiconductor materials and technologies.
NASA Astrophysics Data System (ADS)
Lee, Jongmin; Eichenfield, Matt; Douglas, Erica; Mudrick, John; Biedermann, Grant; Jau, Yuan-Yu
2017-04-01
Trapping neutral atoms in the evanescent fields generated by microfabricated nano-waveguides will provide a new platform for neutral atom quantum controls via strong atom-photon interactions. At Sandia National Labs, we are aiming at developing the related technology that can enable the efficient optical coupling to the waveguide at multiple wavelengths, fabrication nano-waveguides to handle required optical power, more robust waveguide structure, and the new fabrication geometry to facilitate the cold-atom experiments. We will report our latest results on the related subjects. Sandia National Laboratories, Albuquerque, New Mexico 87185, USA.
3D Microfabrication Using Emulsion Mask Grayscale Photolithography Technique
NASA Astrophysics Data System (ADS)
Lee, Tze Pin; Mohamed, Khairudin
2016-02-01
Recently, the rapid development of technology such as biochips, microfluidic, micro-optical devices and micro-electromechanical-systems (MEMS) demands the capability to create complex design of three-dimensional (3D) microstructures. In order to create 3D microstructures, the traditional photolithography process often requires multiple photomasks to form 3D pattern from several stacked photoresist layers. This fabrication method is extremely time consuming, low throughput, costly and complicated to conduct for high volume manufacturing scale. On the other hand, next generation lithography such as electron beam lithography (EBL), focused ion beam lithography (FIB) and extreme ultraviolet lithography (EUV) are however too costly and the machines require expertise to setup. Therefore, the purpose of this study is to develop a simplified method in producing 3D microstructures using single grayscale emulsion mask technique. By using this grayscale fabrication method, microstructures of thickness as high as 500μm and as low as 20μm are obtained in a single photolithography exposure. Finally, the fabrication of 3D microfluidic channel has been demonstrated by using this grayscale photolithographic technique.
Laboratory characterization of shale pores
NASA Astrophysics Data System (ADS)
Nur Listiyowati, Lina
2018-02-01
To estimate the potential of shale gas reservoir, one needs to understand the characteristics of pore structures. Characterization of shale gas reservoir microstructure is still a challenge due to ultra-fine grained micro-fabric and micro level heterogeneity of these sedimentary rocks. The sample used in the analysis is a small portion of any reservoir. Thus, each measurement technique has a different result. It raises the question which methods are suitable for characterizing pore shale. The goal of this paper is to summarize some of the microstructure analysis tools of shale rock to get near-real results. The two analyzing pore structure methods are indirect measurement (MIP, He, NMR, LTNA) and direct observation (SEM, TEM, Xray CT). Shale rocks have a high heterogeneity; thus, it needs multiscale quantification techniques to understand their pore structures. To describe the complex pore system of shale, several measurement techniques are needed to characterize the surface area and pore size distribution (LTNA, MIP), shapes, size and distribution of pore (FIB-SEM, TEM, Xray CT), and total porosity (He pycnometer, NMR). The choice of techniques and methods should take into account the purpose of the analysis and also the time and budget.
Development of Minimally Invasive Medical Tools Using Laser Processing on Cylindrical Substrates
NASA Astrophysics Data System (ADS)
Haga, Yoichi; Muyari, Yuta; Goto, Shoji; Matsunaga, Tadao; Esashi, Masayoshi
This paper reports micro-fabrication techniques using laser processing on cylindrical substrates for the realization of high-performance multifunctional minimally invasive medical tools with small sizes. A spring-shaped shape memory alloy (SMA) micro-coil with a square cross section has been fabricated by spiral cutting of a Ti-Ni SMA tube with a femtosecond laser. Small diameter active bending catheter which is actuated by hydraulic suction mechanism for intravascular minimally invasive diagnostics and therapy has also been developed. The catheter is made of a Ti-Ni super elastic alloy (SEA) tube which is processed by laser micromachining and a silicone rubber tube which covers the outside of the SEA tube. The active catheter is effective for insertion in branch of blood vessel which diverse in acute angle which is difficult to proceed. Multilayer metallization and patterning have been performed on glass tubes with 2 and 3 mm external diameters using maskless lithography techniques using a laser exposure system. Using laser soldering technique, a integrated circuit parts have been mounted on a multilayer circuit patterned on a glass tube. These fabrication techniques will effective for realization of high-performance multifunctional catheters, endoscopic tools, and implanted small capsules.
NASA Astrophysics Data System (ADS)
Wang, N.; Meissner, M. V.; MacKinnon, N.; Luchnikov, V.; Mager, D.; Korvink, J. G.
2018-02-01
We present a new fabrication process to create sub-mm micro tubes with embedded conductive patterns. Based on common 2D patterning techniques and a specially designed rolling process, it achieves 3D structures featuring potentially complex, embedded electrical, mechanical and micro-fluidic functions. We demonstrate the advantage in creating freeform electrical conductors around sub-mm tubes, such as needed for a tube-integrated micro heater. The production of the 2D patterns is flexible, and we demonstrate that both additive manufacturing (fast, accessible) and conventional micro-fabrication processes (cleanroom, wafer-scale) are compatible with the rolling process. To adapt the rolling process for high frequency applications, the patterned tracks can be directly electroplated, with good adhesion, to reduce electrical resistance. For the first time, we achieve saddle-geometry NMR micro detectors. They feature 100 μm wide, 10 μm thick conductive tracks on 25 μm thick polyimide film, and were successfully tested in a 500 MHz (11.7 T) NMR spectrometer. Using a 620 μm diameter coil, we measured the single-shot SNR of deionized water sample, which corresponded to a mole sensitivity of 18.78 nmolHz-1/2 , and a water line shape of 1.52/26.8/37.3 Hz (50, 0.55, 0.11% of the maximum height) from a sample volume of only 82 nl.
Spontaneous wettability patterning via creasing instability
Chen, Dayong; McKinley, Gareth H.; Cohen, Robert E.
2016-01-01
Surfaces with patterned wettability contrast are important in industrial applications such as heat transfer, water collection, and particle separation. Traditional methods of fabricating such surfaces rely on microfabrication technologies, which are only applicable to certain substrates and are difficult to scale up and implement on curved surfaces. By taking advantage of a mechanical instability on a polyurethane elastomer film, we show that wettability patterns on both flat and curved surfaces can be generated spontaneously via a simple dip coating process. Variations in dipping time, sample prestress, and chemical treatment enable independent control of domain size (from about 100 to 500 μm), morphology, and wettability contrast, respectively. We characterize the wettability contrast using local surface energy measurements via the sessile droplet technique and tensiometry. PMID:27382170
NASA Astrophysics Data System (ADS)
Tang, Q. C.; Yang, Y. L.; Li, Xinxin
2011-12-01
This paper presents miniaturized energy harvesters, where the frequency up-conversion technique is used to improve the bandwidth of vibration energy harvesters. The proposed and developed miniature piezoelectric energy harvester utilizes magnetic repulsion forces to achieve non-contact frequency up-conversion, thereby avoiding mechanical collision and wear for long-term working durability. A pair of piezoelectric resonant cantilevers is micro-fabricated to generate electric power. A simplified model involving linear oscillators and magnetic interaction is deployed to demonstrate the feasibility of the device design. A bench-top harvester has been fabricated and characterized, resulting in average power generation of over 10 µW within a broad frequency range of 10-22 Hz under 1g acceleration.
A microfluidic microreactor for the synthesis of gold nanorods.
Day, Daniel; Gu, Min
2009-03-11
A microfluidic microreactor for the synthesis of gold nanorods is fabricated using femtosecond pulse laser microfabrication techniques. Femtosecond pulse lasers are able to etch a wide range of materials that are required for a microreactor, from the photomasks to the microheaters. The heating of the fluid in the microreactor is achieved through the design and fabrication of a microscale heating element incorporated onto the bottom surface of the microreactor which is capable of reaching temperatures greater than 130 degrees C. Computational fluid dynamic simulations of the heating profile of an optimized microreactor show increased heating performance with respect to a serpentine microreactor. The synthesis of gold nanorods is demonstrated in the optimized microreactor, based on a flow rate of 0.5 microg min(-1).
Broeckhoven, Ken; Desmet, Gert
2007-11-16
Using a combination of both analytical and numerical techniques, approximate analytical expressions have been established for the transient and long time limit band broadening, originating from the presence of a thin disturbed sidewall layer in liquid chromatography columns, including packed, monolithic as well as microfabricated columns. The established expressions can be used to compare the importance of a thin disturbed sidewall layer with that of other radial heterogeneity effects (such as transcolumn packing density variations due to the relief of packing stresses). The expressions are independent of the actual velocity profile inside the layer as long as the disturbed sidewall layer occupies less than 2.5% of the column width.
OASIS: Organics Analyzer for Sampling Icy Surfaces
NASA Technical Reports Server (NTRS)
Getty, S. A.; Dworkin, J. P.; Glavin, D. P.; Martin, M.; Zheng, Y.; Balvin, M.; Southard, A. E.; Ferrance, J.; Malespin, C.
2012-01-01
Liquid chromatography mass spectrometry (LC-MS) is a well established laboratory technique for detecting and analyzing organic molecules. This approach has been especially fruitful in the analysis of nucleobases, amino acids, and establishing chirol ratios [1 -3]. We are developing OASIS, Organics Analyzer for Sampling Icy Surfaces, for future in situ landed missions to astrochemically important icy bodies, such as asteroids, comets, and icy moons. The OASIS design employs a microfabricated, on-chip analytical column to chromatographically separate liquid ana1ytes using known LC stationary phase chemistries. The elution products are then interfaced through electrospray ionization (ESI) and analyzed by a time-of-flight mass spectrometer (TOF-MS). A particular advantage of this design is its suitability for microgravity environments, such as for a primitive small body.
Miniature reciprocating heat pumps and engines
NASA Technical Reports Server (NTRS)
Thiesen, Jack H. (Inventor); Mohling, Robert A. (Inventor); Willen, Gary S. (Inventor)
2003-01-01
The present invention discloses a miniature thermodynamic device that can be constructed using standard micro-fabrication techniques. The device can be used to provide cooling, generate power, compress gases, pump fluids and reduce pressure below ambient (operate as a vacuum pump). Embodiments of the invention relating to the production of a cooling effect and the generation of electrical power, change the thermodynamic state of the system by extracting energy from a pressurized fluid. Energy extraction is attained using an expansion process, which is as nearly isentropic as possible for the appropriately chosen fluid. An isentropic expansion occurs when a compressed gas does work to expand, and in the disclosed embodiments, the gas does work by overcoming either an electrostatic or a magnetic force.
Ion bipolar junction transistors
Tybrandt, Klas; Larsson, Karin C.; Richter-Dahlfors, Agneta; Berggren, Magnus
2010-01-01
Dynamic control of chemical microenvironments is essential for continued development in numerous fields of life sciences. Such control could be achieved with active chemical circuits for delivery of ions and biomolecules. As the basis for such circuitry, we report a solid-state ion bipolar junction transistor (IBJT) based on conducting polymers and thin films of anion- and cation-selective membranes. The IBJT is the ionic analogue to the conventional semiconductor BJT and is manufactured using standard microfabrication techniques. Transistor characteristics along with a model describing the principle of operation, in which an anionic base current amplifies a cationic collector current, are presented. By employing the IBJT as a bioelectronic circuit element for delivery of the neurotransmitter acetylcholine, its efficacy in modulating neuronal cell signaling is demonstrated. PMID:20479274
Microfabricated microengine with constant rotation rate
Romero, Louis A.; Dickey, Fred M.
1999-01-01
A microengine uses two synchronized linear actuators as a power source and converts oscillatory motion from the actuators into constant rotational motion via direct linkage connection to an output gear or wheel. The microengine provides output in the form of a continuously rotating output gear that is capable of delivering drive torque at a constant rotation to a micromechanism. The output gear can have gear teeth on its outer perimeter for directly contacting a micromechanism requiring mechanical power. The gear is retained by a retaining means which allows said gear to rotate freely. The microengine is microfabricated of polysilicon on one wafer using surface micromachining batch fabrication.
NASA Astrophysics Data System (ADS)
Sasaki, Darryl Y.; Cox, Jimmy D.; Follstaedt, Susan C.; Curry, Mark S.; Skirboll, Steven K.; Gourley, Paul L.
2001-05-01
The development of microsystems that merge biological materials with microfabricated structures is highly dependent on the successful interfacial interactions between these innately incompatible materials. Surface passivation of semiconductor and glass surfaces with thin organic films can attenuate the adhesion of proteins and cells that lead to biofilm formation and biofouling of fluidic structures. We have examined the adhesion of glial cells and serum albumin proteins to microfabricated glass and semiconductor surfaces coated with self-assembled monolayers of octadecyltrimethoxysilane and N-(triethoxysilylpropyl)-O- polyethylene oxide urethane, to evaluate the biocompatibility and surface passivation those coatings provide.
The Nano-Patch-Clamp Array: Microfabricated Glass Chips for High-Throughput Electrophysiology
NASA Astrophysics Data System (ADS)
Fertig, Niels
2003-03-01
Electrophysiology (i.e. patch clamping) remains the gold standard for pharmacological testing of putative ion channel active drugs (ICADs), but suffers from low throughput. A new ion channel screening technology based on microfabricated glass chip devices will be presented. The glass chips contain very fine apertures, which are used for whole-cell voltage clamp recordings as well as single channel recordings from mammalian cell lines. Chips containing multiple patch clamp wells will be used in a first bench-top device, which will allow perfusion and electrical readout of each well. This scalable technology will allow for automated, rapid and parallel screening on ion channel drug targets.
Engineering Novel Detectors and Sensors for MRI
Qian, Chunqi; Zabow, Gary; Koretsky, Alan
2013-01-01
Increasing detection sensitivity and image contrast have always been major topics of research in MRI. In this perspective, we summarize two engineering approaches to make detectors and sensors that have potential to extend the capability of MRI. The first approach is to integrate miniaturized detectors with a wireless powered parametric amplifier to enhance the detection sensitivity of remotely coupled detectors. The second approach is to microfabricate contrast agents with encoded multispectral frequency shifts, whose properties can be specified and fine-tuned by geometry. These two complementary approaches will benefit from the rapid development in nanotechnology and microfabrication which should enable new opportunities for MRI. PMID:23245489
Nanoscale displacement sensing using microfabricated variable-inductance planar coils
NASA Astrophysics Data System (ADS)
Coskun, M. Bulut; Thotahewa, Kasun; Ying, York-Sing; Yuce, Mehmet; Neild, Adrian; Alan, Tuncay
2013-09-01
Microfabricated spiral inductors were employed for nanoscale displacement detection, suitable for use in implantable pressure sensor applications. We developed a variable inductor sensor consisting of two coaxially positioned planar coils connected in series to a measurement circuit. The devices were characterized by varying the air gap between the coils hence changing the inductance, while a Colpitts oscillator readout was used to obtain corresponding frequencies. Our approach shows significant advantages over existing methodologies combining a displacement resolution of 17 nm and low hysteresis (0.15%) in a 1 × 1 mm2 device. We show that resolution could be further improved by shrinking the device's lateral dimensions.
Real-Time Ozone Detection Based on a Microfabricated Quartz Crystal Tuning Fork Sensor
Wang, Rui; Tsow, Francis; Zhang, Xuezhi; Peng, Jhih-Hong; Forzani, Erica S.; Chen, Yongsheng; Crittenden, John C.; Destaillats, Hugo; Tao, Nongjian
2009-01-01
A chemical sensor for ozone based on an array of microfabricated tuning forks is described. The tuning forks are highly sensitive and stable, with low power consumption and cost. The selective detection is based on the specific reaction of the polymer with ozone. With a mass detection limit of ∼2 pg/mm2 and response time of 1 second, the sensor coated with a polymer sensing material can detect ppb-level ozone in air. The sensor is integrated into a miniaturized wearable device containing a detection circuit, filtration, battery and wireless communication chip, which is ideal for personal and microenvironmental chemical exposure monitoring. PMID:22346720
DOE Office of Scientific and Technical Information (OSTI.GOV)
Huda, Sabil; Pilans, Didzis; Makurath, Monika
Cell motions are driven by coordinated actions of the intracellular cytoskeleton – actin, microtubules (MTs) and substrate/focal adhesions (FAs). This coordination is altered in metastatic cancer cells resulting in deregulated and increased cellular motility. Microfabrication tools, including photolithography, micromolding, microcontact printing, wet stamping and microfluidic devices have emerged as a powerful set of experimental tools with which to probe and define the differences in cytoskeleton organization/dynamics and cell motility patterns in non-metastatic and metastatic cancer cells. In this paper, we discuss four categories of microfabricated systems: (i) micropatterned substrates for studying of cell motility sub-processes (for example, MT targeting ofmore » FAs or cell polarization); (ii) systems for studying cell mechanical properties, (iii) systems for probing overall cell motility patterns within challenging geometric confines relevant to metastasis (for example, linear and ratchet geometries), and (iv) microfluidic devices that incorporate co-cultures of multiple cell types and chemical gradients to mimic in vivo intravasation/extravasation steps of metastasis. Finally, together, these systems allow for creating controlled microenvironments that not only mimic complex soft tissues, but are also compatible with live cell high-resolution imaging and quantitative analysis of single cell behavior.« less
Huda, Sabil; Pilans, Didzis; Makurath, Monika; ...
2014-08-28
Cell motions are driven by coordinated actions of the intracellular cytoskeleton – actin, microtubules (MTs) and substrate/focal adhesions (FAs). This coordination is altered in metastatic cancer cells resulting in deregulated and increased cellular motility. Microfabrication tools, including photolithography, micromolding, microcontact printing, wet stamping and microfluidic devices have emerged as a powerful set of experimental tools with which to probe and define the differences in cytoskeleton organization/dynamics and cell motility patterns in non-metastatic and metastatic cancer cells. In this paper, we discuss four categories of microfabricated systems: (i) micropatterned substrates for studying of cell motility sub-processes (for example, MT targeting ofmore » FAs or cell polarization); (ii) systems for studying cell mechanical properties, (iii) systems for probing overall cell motility patterns within challenging geometric confines relevant to metastasis (for example, linear and ratchet geometries), and (iv) microfluidic devices that incorporate co-cultures of multiple cell types and chemical gradients to mimic in vivo intravasation/extravasation steps of metastasis. Finally, together, these systems allow for creating controlled microenvironments that not only mimic complex soft tissues, but are also compatible with live cell high-resolution imaging and quantitative analysis of single cell behavior.« less
Microfluidic pressure sensing using trapped air compression.
Srivastava, Nimisha; Burns, Mark A
2007-05-01
We have developed a microfluidic method for measuring the fluid pressure head experienced at any location inside a microchannel. The principal component is a microfabricated sealed chamber with a single inlet and no exit; the entrance to the single inlet is positioned at the location where pressure is to be measured. The pressure measurement is then based on monitoring the movement of a liquid-air interface as it compresses air trapped inside the microfabricated sealed chamber and calculating the pressure using the ideal gas law. The method has been used to measure the pressure of the air stream and continuous liquid flow inside microfluidic channels (d approximately 50 microm). Further, a pressure drop has also been measured using multiple microfabricated sealed chambers. For air pressure, a resolution of 700 Pa within a full-scale range of 700-100 kPa was obtained. For liquids, pressure drops as low as 70 Pa were obtained in an operating range from 70 Pa to 10 kPa. Since the method primarily uses a microfluidic sealed chamber, it does not require additional fabrication steps and may easily be incorporated in several lab-on-a-chip fluidic applications for laminar as well as turbulent flow conditions.
Microfluidic pressure sensing using trapped air compression
Srivastava, Nimisha; Burns, Mark A.
2010-01-01
We have developed a microfluidic method for measuring the fluid pressure head experienced at any location inside a microchannel. The principal component is a microfabricated sealed chamber with a single inlet and no exit; the entrance to the single inlet is positioned at the location where pressure is to be measured. The pressure measurement is then based on monitoring the movement of a liquid–air interface as it compresses air trapped inside the microfabricated sealed chamber and calculating the pressure using the ideal gas law. The method has been used to measure the pressure of the air stream and continuous liquid flow inside microfluidic channels (d ~ 50 μm). Further, a pressure drop has also been measured using multiple microfabricated sealed chambers. For air pressure, a resolution of 700 Pa within a full-scale range of 700–100 kPa was obtained. For liquids, pressure drops as low as 70 Pa were obtained in an operating range from 70 Pa to 10 kPa. Since the method primarily uses a microfluidic sealed chamber, it does not require additional fabrication steps and may easily be incorporated in several lab-on-a-chip fluidic applications for laminar as well as turbulent flow conditions. PMID:17476384
NASA Technical Reports Server (NTRS)
Prasad, Narashimha S.; Taylor, Patrick J.; Trivedi, Sudhir B.; Kutcher, Susan
2010-01-01
We report the results of fabrication and testing of a thermoelectric power generation module. The module was fabricated using a new "flip-chip" module assembly technique that is scalable and modular. This technique results in a low value of contact resistivity ( < or = 10(exp 5) Ohms-sq cm). It can be used to leverage new advances in thin-film and nanostructured materials for the fabrication of new miniature thermoelectric devices. It may also enable monolithic integration of large devices or tandem arrays of devices on flexible or curved surfaces. Under mild testing, a power of 22 mW/sq cm was obtained from small (<100 K) temperature differences. At higher, more realistic temperature differences, approx.500 K, where the efficiency of these materials greatly improves, this power density would scale to between 0.5 and 1 Watt/cm2. These results highlight the excellent potential for the generation and scavenging of electrical power of practical and usable magnitude for remote applications using thermoelectric power generation technologies.
Johnson, Ashley R.; Caudill, Cassie L.; Tumbleston, John R.; Bloomquist, Cameron J.; Moga, Katherine A.; Ermoshkin, Alexander; Shirvanyants, David; Mecham, Sue J.; Luft, J. Christopher; DeSimone, Joseph M.
2016-01-01
Microneedles, arrays of micron-sized needles that painlessly puncture the skin, enable transdermal delivery of medications that are difficult to deliver using more traditional routes. Many important design parameters, such as microneedle size, shape, spacing, and composition, are known to influence efficacy, but are notoriously difficult to alter due to the complex nature of microfabrication techniques. Herein, we utilize a novel additive manufacturing (“3D printing”) technique called Continuous Liquid Interface Production (CLIP) to rapidly prototype sharp microneedles with tuneable geometries (size, shape, aspect ratio, spacing). This technology allows for mold-independent, one-step manufacturing of microneedle arrays of virtually any design in less than 10 minutes per patch. Square pyramidal CLIP microneedles composed of trimethylolpropane triacrylate, polyacrylic acid and photopolymerizable derivatives of polyethylene glycol and polycaprolactone were fabricated to demonstrate the range of materials that can be utilized within this platform for encapsulating and controlling the release of therapeutics. These CLIP microneedles effectively pierced murine skin ex vivo and released the fluorescent drug surrogate rhodamine. PMID:27607247
Glucose Fuel Cells with a MicroChannel Fabricated on Flexible Polyimide Film
NASA Astrophysics Data System (ADS)
Sano, Ryohei; Fukushi, Yudai; Sasaki, Tsubasa; Mogi, Hiroshi; Koide, Syohei; Ikoma, Ryuta; Akatsuka, Wataru; Tsujimura, Seiya; Nishioka, Yasushiro
2013-12-01
In this work, a glucose fuel cell was fabricated using microfabrication processes assigned for microelectromechanical systems. The fuel cell was equipped with a microchannel to flow an aqueous solution of glucose. The cell was fabricated on a flexible polyimide substrate, and its porous carbon-coated aluminum (Al) electrodes of 2.8 mm in width and 11 mm in length were formed using photolithography and screen printing techniques. Porous carbon was deposited by screen printing of carbon black ink on the Al electrode surfaces in order to increase the effective electrode surface area and to absorb more enzymes on the electrode surfaces. The microchannel with a depth of 200 μm was fabricated using a hot embossing technique. A maximum power of 0.45 μW at 0.5 V that corresponds to a power density of 1.45 μW/cm2 was realized by introducing a 200 mM concentrated glucose solution at room temperature.
Chen, Jem-Kun; Chang, Chi-Jung
2014-01-01
In the past two decades, we have witnessed significant progress in developing high performance stimuli-responsive polymeric materials. This review focuses on recent developments in the preparation and application of patterned stimuli-responsive polymers, including thermoresponsive layers, pH/ionic-responsive hydrogels, photo-responsive film, magnetically-responsive composites, electroactive composites, and solvent-responsive composites. Many important new applications for stimuli-responsive polymers lie in the field of nano- and micro-fabrication, where stimuli-responsive polymers are being established as important manipulation tools. Some techniques have been developed to selectively position organic molecules and then to obtain well-defined patterned substrates at the micrometer or submicrometer scale. Methods for patterning of stimuli-responsive hydrogels, including photolithography, electron beam lithography, scanning probe writing, and printing techniques (microcontact printing, ink-jet printing) were surveyed. We also surveyed the applications of nanostructured stimuli-responsive hydrogels, such as biotechnology (biological interfaces and purification of biomacromoles), switchable wettability, sensors (optical sensors, biosensors, chemical sensors), and actuators. PMID:28788489
Note: On-chip multifunctional fluorescent-magnetic Janus helical microswimmers
DOE Office of Scientific and Technical Information (OSTI.GOV)
Hwang, G., E-mail: gilgueng.hwang@lpn.cnrs.fr; Decanini, D.; Leroy, L.
Microswimmers integrated into microfluidic devices that are capable of self-illumination through fluorescence could revolutionize many aspects of technology, especially for biological applications. Few illumination and propulsion techniques of helical microswimmers inside microfluidic channels have been demonstrated. This paper presents the fabrication, detachment, and magnetic propulsions of multifunctional fluorescent-magnetic helical microswimmers integrated inside microfluidics. The fabrication process is based on two-photon laser lithography to pattern 3-D nanostructures from fluorescent photoresist coupled with conventional microfabrication techniques for magnetic thin film deposition by shadowing. After direct integration inside a microfluidic device, injected gas bubble allows gentle detachment of the integrated helical microswimmers whosemore » magnetic propulsion can then be directly applied inside the microfluidic channel using external electromagnetic coil setup. With their small scale, fluorescence, excellent resistance to liquid/gas surface tension, and robust propulsion capability inside the microfluidic channel, the microswimmers can be used as high-resolution and large-range mobile micromanipulators inside microfluidic channels.« less
In vitro systems for the study of microtubule-based cell polarity in fission yeast.
Taberner, Núria; Lof, Andries; Roth, Sophie; Lamers, Dimitry; Zeijlemaker, Hans; Dogterom, Marileen
2015-01-01
Establishment of cell polarity is essential for processes such as growth and division. In fission yeast, as well as other species, polarity factors travel at the ends of microtubules to cortical sites where they associate with the membrane and subsequently maintain a polarized activity pattern despite their ability to diffuse in the membrane. In this chapter we present methods to establish an in vitro system that captures the essential features of this process. This bottom-up approach allows us to identify the minimal molecular requirements for microtubule-based cell polarity. We employ microfabrication techniques combined with surface functionalization to create rigid chambers with affinity for proteins, as well as microfluidic techniques to create and shape emulsion droplets with functionalized lipid boundaries. Preliminary results are shown demonstrating that a properly organized microtubule cytoskeleton can be confined to these confined spaces, and proteins traveling at the ends of growing microtubules can be delivered to their boundaries. Copyright © 2015 Elsevier Inc. All rights reserved.
Inertial focusing and passive micro-mixing techniques for rare cells capturing microfluidic platform
NASA Astrophysics Data System (ADS)
Phadke, Manisha; Shaner, Sebastian; Shah, Shreyas; Rodriguez, Ygnacio; Wibowo, Denni; Whulanza, Yudan; Teriete, Peter; Allen, Jeff; Kassegne, Sam
2018-02-01
Isolation and capture of rare cells continues to be a daunting task that is still looking for an innovative and efficient method. While a variety of approaches have been suggested over the past several years, immunocapturing in a microfluidic platform carries a substantial promise as shown by recent published works. In this paper, we introduced a combination of inertial focusing and passive micro-mixing through 3D chevron-type features in a microchannel to induce chaotic mixing within antibody-coated microchannels and, ultimately, promote rare cell capture. The device introduced in this work contains curved microchannels that consist of a series of staggered chevron grooves. The curved channels enable inertial focusing while the chevron grooves allow for chaotic mixing. The microfluidics platform microfabricated through soft lithography has a polydimethylsiloxane (PDMS) foundation and was thinly coated with an alginate hydrogel derivatized with streptavidin. We submitted that our qualitative and quantitative results demonstrated the potentials in advancements in rare cell isolation through this integration of two techniques.
Ultrafast laser direct hard-mask writing for high efficiency c-Si texture designs
NASA Astrophysics Data System (ADS)
Kumar, Kitty; Lee, Kenneth K. C.; Nogami, Jun; Herman, Peter R.; Kherani, Nazir P.
2013-03-01
This study reports a high-resolution hard-mask laser writing technique to facilitate the selective etching of crystalline silicon (c-Si) into an inverted-pyramidal texture with feature size and periodicity on the order of the wavelength which, thus, provides for both anti-reflection and effective light-trapping of infrared and visible light. The process also enables engineered positional placement of the inverted-pyramid thereby providing another parameter for optimal design of an optically efficient pattern. The proposed technique, a non-cleanroom process, is scalable for large area micro-fabrication of high-efficiency thin c-Si photovoltaics. Optical wave simulations suggest the fabricated textured surface with 1.3 μm inverted-pyramids and a single anti-reflective coating increases the relative energy conversion efficiency by 11% compared to the PERL-cell texture with 9 μm inverted pyramids on a 400 μm thick wafer. This efficiency gain is anticipated to improve further for thinner wafers due to enhanced diffractive light trapping effects.
NASA Astrophysics Data System (ADS)
Myers, Michael James
We describe the development of a novel millimeter-wave cryogenic detector. The device integrates a planar antenna, superconducting transmission line, bandpass filter, and bolometer onto a single silicon wafer. The bolometer uses a superconducting Transition-Edge Sensor (TES) thermistor, which provides substantial advantages over conventional semiconductor bolometers. The detector chip is fabricated using standard micro-fabrication techniques. This highly-integrated detector architecture is particularly well-suited for use in the de- velopment of polarization-sensitive cryogenic receivers with thousands of pixels. Such receivers are needed to meet the sensitivity requirements of next-generation cosmic microwave background polarization experiments. The design, fabrication, and testing of prototype array pixels are described. Preliminary considerations for a full array design are also discussed. A set of on-chip millimeter-wave test structures were developed to help understand the performance of our millimeter-wave microstrip circuits. These test structures produce a calibrated transmission measurement for an arbitrary two-port circuit using optical techniques, rather than a network analyzer. Some results of fabricated test structures are presented.
Shrink-induced biomimetic wrinkled substrates for functional cardiac cell alignment and culture.
Mendoza, Nicole; Tu, Roger; Chen, Aaron; Lee, Eugene; Khine, Michelle
2014-01-01
The anisotropic alignment of cardiomyocytes in native myocardium tissue is a functional feature that is absent in traditional in vitro cardiac cell culture. Microenvironmental factors cue structural organization of the myocardium, which promotes the mechanical contractile properties and electrophysiological patterns seen in mature cardiomyocytes. Current nano- and microfabrication techniques, such as photolithography, generate simplified cell culture topographies that are not truly representative of the multifaceted and multi-scale fibrils of the cardiac extracellular matrix. In addition, such technologies are costly and require a clean room for fabrication. This chapter offers an easy, fast, robust, and inexpensive fabrication of biomimetic multi-scale wrinkled surfaces through the process of plasma treating and shrinking prestressed thermoplastic. Additionally, this chapter includes techniques for culturing stem cells and their cardiac derivatives on these substrates. Importantly, this wrinkled cell culture platform is compatible with both fluorescence and bright-field imaging; real-time physiological monitoring of CM action potential propagation and contraction properties can elucidate cardiotoxicity drug effects.
Directed Assembly of Cells with Magnetic Nanowires
NASA Astrophysics Data System (ADS)
Tanase, M.; Hultgren, A.; Chen, C. S.; Reich, D. H.
2003-03-01
We demonstrate the use of magnetic nanowires for assembly and manipulation of mammalian cells. Currently, superparamagnetic beads are used for manipulations of cells, but large field strengths and gradients are required for these to be effective. Unlike the beads, the large remnant magnetization of the nanowires offers the prospect of a variety of low-field manipulation techniques. Ferromagnetic nanowires suspended in fluids can be easily manipulated and assembled using small magnetic field [1]. The wires can be bound to cells, and the dipolar interaction between the nanowires can be used to create self-assembled cell chains. Microfabricated arrays of Py magnets were used to trap single cells or chains of cells bound to Ni nanowires. Possible applications of these techniques include controlled initiation of cell cultures, as well as isolation of individual cells. This work was supported by DARPA/AFOSR Grant No. F49620-02-1-0307 and by the David and Lucile Packard Foundation Grant No. 2001-17715. [1] M. Tanase et.al., Nanoletters 1, 155 (2001), J. Appl. Phys. 91, 8549 (2002).
Microfabrication of hierarchical structures for engineered mechanical materials
NASA Astrophysics Data System (ADS)
Vera Canudas, Marc
Materials found in nature present, in some cases, unique properties from their constituents that are of great interest in engineered materials for applications ranging from structural materials for the construction of bridges, canals and buildings to the fabrication of new lightweight composites for airplane and automotive bodies, to protective thin film coatings, amongst other fields. Research in the growing field of biomimetic materials indicates that the micro-architectures present in natural materials are critical to their macroscopic mechanical properties. A better understanding of the effect that structure and hierarchy across scales have on the material properties will enable engineered materials with enhanced properties. At the moment, very few theoretical models predict mechanical properties of simple materials based on their microstructures. Moreover these models are based on observations from complex biological systems. One way to overcome this challenge is through the use of microfabrication techniques to design and fabricate simple materials, more appropriate for the study of hierarchical organizations and microstructured materials. Arrays of structures with controlled geometry and dimension can be designed and fabricated at different length scales, ranging from a few hundred nanometers to centimeters, in order to mimic similar systems found in nature. In this thesis, materials have been fabricated in order to gain fundamental insight into the complex hierarchical materials found in nature and to engineer novel materials with enhanced mechanical properties. The materials fabricated here were mechanically characterized and compared to simple mechanics models to describe their behavior with the goal of applying the knowledge acquired to the design and synthesis of future engineered materials with novel properties.
A microfabricated fringing field capacitive pH sensor with an integrated readout circuit
NASA Astrophysics Data System (ADS)
Arefin, Md Shamsul; Bulut Coskun, M.; Alan, Tuncay; Redoute, Jean-Michel; Neild, Adrian; Rasit Yuce, Mehmet
2014-06-01
This work presents a microfabricated fringe-field capacitive pH sensor using interdigitated electrodes and an integrated modulation-based readout circuit. The changes in capacitance of the sensor result from the permittivity changes due to pH variations and are converted to frequency shifts using a crossed-coupled voltage controlled oscillator readout circuit. The shift in resonant frequency of the readout circuit is 30.96 MHz for a change in pH of 1.0-5.0. The sensor can be used for the measurement of low pH levels, such as gastric acid, and can be integrated with electronic pills. The measurement results show high repeatability, low noise, and a stable output.
Magnetoresistance due to domain walls in an epitaxial microfabricated Fe wire
NASA Astrophysics Data System (ADS)
Rüdiger, U.; Yu, J.; Kent, A. D.; Parkin, S. S. P.
1998-08-01
The domain wall (DW) contribution to magnetoresistance has been investigated using an epitaxial microfabricated bcc (110) Fe wires of 2 μm linewidth. A strong in-plane uniaxial component to the magnetic anisotropy perpendicular to the wire axis causes a regular stripe domain pattern with closure domains. The stripe domain width in zero-applied magnetic field is strongly affected by the magnetic history and can be continuously varied from 0.45 to 1.8 μm. This enables a measurement of the resistivity as a function of DW density in a single wire. Clear evidence is presented that the resistivity is reduced in the presence of DWs at low temperatures.
Microfabricated triggered vacuum switch
Roesler, Alexander W [Tijeras, NM; Schare, Joshua M [Albuquerque, NM; Bunch, Kyle [Albuquerque, NM
2010-05-11
A microfabricated vacuum switch is disclosed which includes a substrate upon which an anode, cathode and trigger electrode are located. A cover is sealed over the substrate under vacuum to complete the vacuum switch. In some embodiments of the present invention, a metal cover can be used in place of the trigger electrode on the substrate. Materials used for the vacuum switch are compatible with high vacuum, relatively high temperature processing. These materials include molybdenum, niobium, copper, tungsten, aluminum and alloys thereof for the anode and cathode. Carbon in the form of graphitic carbon, a diamond-like material, or carbon nanotubes can be used in the trigger electrode. Channels can be optionally formed in the substrate to mitigate against surface breakdown.
Silicon microfabricated beam expander
NASA Astrophysics Data System (ADS)
Othman, A.; Ibrahim, M. N.; Hamzah, I. H.; Sulaiman, A. A.; Ain, M. F.
2015-03-01
The feasibility design and development methods of silicon microfabricated beam expander are described. Silicon bulk micromachining fabrication technology is used in producing features of the structure. A high-precision complex 3-D shape of the expander can be formed by exploiting the predictable anisotropic wet etching characteristics of single-crystal silicon in aqueous Potassium-Hydroxide (KOH) solution. The beam-expander consist of two elements, a micromachined silicon reflector chamber and micro-Fresnel zone plate. The micro-Fresnel element is patterned using lithographic methods. The reflector chamber element has a depth of 40 µm, a diameter of 15 mm and gold-coated surfaces. The impact on the depth, diameter of the chamber and absorption for improved performance are discussed.
Micro/nanofabricated environments for synthetic biology.
Collier, C Patrick; Simpson, Michael L
2011-08-01
A better understanding of how confinement, crowding and reduced dimensionality modulate reactivity and reaction dynamics will aid in the rational and systematic discovery of functionality in complex biological systems. Artificial microfabricated and nanofabricated structures have helped elucidate the effects of nanoscale spatial confinement and segregation on biological behavior, particularly when integrated with microfluidics, through precise control in both space and time of diffusible signals and binding interactions. Examples of nanostructured interfaces for synthetic biology include the development of cell-like compartments for encapsulating biochemical reactions, nanostructured environments for fundamental studies of diffusion, molecular transport and biochemical reaction kinetics, and regulation of biomolecular interactions as functions of microfabricated and nanofabricated topological constraints. Copyright © 2011 Elsevier Ltd. All rights reserved.
NASA Astrophysics Data System (ADS)
Collins, David J.; Alan, Tuncay; Neild, Adrian
2014-07-01
We introduce a surface acoustic wave (SAW) based method for acoustically controlled concentration, capture, release, and sorting of particles in a microfluidic system. This method is power efficient by the nature of its design: the vertical direction of a traveling acoustic wave, in which the majority of the energy at the SAW-water interface is directed, is used to concentrate particles behind a microfabricated polydimethylsiloxane membrane extending partially into a channel. Sorting is also demonstrated with this concentration shown to be size-dependent. Low-power, miniature SAW devices, using methods such as the one demonstrated here, are well placed for future integration into point-of-care diagnostic systems.
Thermal and Structural Analysis of Micro-Fabricated Involute Regenerators
NASA Astrophysics Data System (ADS)
Qiu, Songgang; Augenblick, Jack E.
2005-02-01
Long-life, high-efficiency power generators based on free-piston Stirling engines are an energy conversion solution for future space power generation and commercial applications. As part of the efforts to further improve Stirling engine efficiency and reliability, a micro-fabricated, involute regenerator structure is proposed by a Cleveland State University-led regenerator research team. This paper reports on thermal and structural analyses of the involute regenerator to demonstrate the feasibility of the proposed regenerator. The results indicate that the involute regenerator has extremely high axial stiffness to sustain reasonable axial compression forces with negligible lateral deformation. The relatively low radial stiffness may impose some challenges to the appropriate installation of the in-volute regenerators.
NASA Astrophysics Data System (ADS)
Lee, Seung Yup; Na, Kyounghwan; Pakela, Julia M.; Scheiman, James M.; Yoon, Euisik; Mycek, Mary-Ann
2017-02-01
We present the design, development, and bench-top verification of an innovative compact clinical system including a miniaturized handheld optoelectronic sensor. The integrated sensor was microfabricated with die-level light-emitting diodes and photodiodes and fits into a 19G hollow needle (internal diameter: 0.75 mm) for optical sensing applications in solid tissues. Bench-top studies on tissue-simulating phantoms have verified system performance relative to a fiberoptic based tissue spectroscopy system. With dramatically reduced system size and cost, the technology affords spatially configurable designs for optoelectronic light sources and detectors, thereby enabling customized sensing configurations that would be impossible to achieve with needle-based fiber-optic probes.
Characterization of spin pumping effect in Permalloy/Cu/Pt microfabricated lateral devices
DOE Office of Scientific and Technical Information (OSTI.GOV)
Yamamoto, Tatsuya, E-mail: tyamamoto@imr.tohoku.ac.jp; Seki, Takeshi; Takanashi, Koki
2014-05-07
We studied ferromagnetic resonance (FMR) for microfabricated lateral devices consisting of a Permalloy (Py) rectangular element and a Pt nano-element bridged by a Cu wire, which were located on a coplanar waveguide. A change in the resonance linewidth (Δf) was observed in the FMR spectra when the distance between Py and Pt (d) was varied. For devices with d < 400 nm, Δf definitely increased, suggesting the enhancement of the Gilbert damping constant (α). We discussed a possible reason for the this enhancement taking into account the increase in the efficiency of spin pumping into Cu due to the spin absorption of themore » attached Pt.« less
Toader, O; John, S
2001-05-11
We present a blueprint for a three-dimensional photonic band gap (PBG) material that is amenable to large-scale microfabrication on the optical scale using glancing angle deposition methods. The proposed chiral crystal consists of square spiral posts on a tetragonal lattice. In the case of silicon posts in air (direct structure), the full PBG can be as large as 15% of the gap center frequency, whereas for air posts in a silicon background (inverted structure) the maximum PBG is 24% of the center frequency. This PBG occurs between the fourth and fifth bands of the photon dispersion relation and is very robust to variations (disorder) in the geometrical parameters of the crystal.
Frequency Response of Graphene Electrolyte-Gated Field-Effect Transistors
McVay, Elaine; Palacios, Tomás
2018-01-01
This work develops the first frequency-dependent small-signal model for graphene electrolyte-gated field-effect transistors (EGFETs). Graphene EGFETs are microfabricated to measure intrinsic voltage gain, frequency response, and to develop a frequency-dependent small-signal model. The transfer function of the graphene EGFET small-signal model is found to contain a unique pole due to a resistive element, which stems from electrolyte gating. Intrinsic voltage gain, cutoff frequency, and transition frequency for the microfabricated graphene EGFETs are approximately 3.1 V/V, 1.9 kHz, and 6.9 kHz, respectively. This work marks a critical step in the development of high-speed chemical and biological sensors using graphene EGFETs. PMID:29414868
A sugar-template manufacturing method for microsystem ion-exchange membranes
NASA Astrophysics Data System (ADS)
Festarini, Rio V.; Pham, Minh-Hao; Liu, Xinyue; Barz, Dominik P. J.
2017-07-01
In this work, we report on a novel method for producing ion-exchange membranes that can be integrated directly into polydimethylsiloxane-based micro devices. Ionomers such as NafionTM, a copolymer with high conductivity and selectivity to small cations, are generally incompatible with common micro device materials due to the chemical inertness of the tetrafluoroethylene-based skeleton and the swelling in aqueous solutions. Hence, we introduce a microfabrication concept where we use consolidated sugar granules as a template to produce a porous polydimethylsiloxane scaffold. Ionomer and scaffold are combined to a composite membrane where the cohesion of these incompatible materials is of rather mechanical nature; i.e. the ionomer is physically entrapped in the scaffold. Electrochemical impedance spectroscopy measurements reveal the excellent membrane conductivity for the upper electrolyte concentrations tested in this work.
New perspectives on neuronal development via microfluidic environments
Millet, Larry J.; Gillette, Martha U.
2012-01-01
Understanding the signals that guide neuronal development and direct formation of axons, dendrites, and synapses during wiring of the brain is a fundamental challenge of developmental neuroscience. Discovering how local signals shape developing neurons has been impeded by the inability of conventional culture methods to interrogate micro-environments of complex neuronal cytoarchitectures, where different sub-domains encounter distinct chemical, physical, and fluidic features. Micro-fabrication techniques are enabling the creation of micro-environments tailored to neuronal structures and sub-domains, with unprecedented access and control. The design, fabrication, and properties of microfluidic devices offer significant advantages for addressing unresolved issues of neuronal development. These high-resolution approaches are poised to contribute new insights into mechanisms for restoring neuronal function and connectivity compromised by injury, stress, and neurodegeneration. PMID:23031246
Huang, Zhe; Parrott, Edward P J; Park, Hongkyu; Chan, Hau Ping; Pickwell-MacPherson, Emma
2014-02-15
A thin-film terahertz polarizer is proposed and realized via a tunable bilayer metal wire-grid structure to achieve high extinction ratios and good transmission. The polarizer is fabricated on top of a thin silica layer by standard micro-fabrication techniques to eliminate the multireflection effects. The tunable alignment of the bilayer aluminum-wire grid structure enables tailoring of the extinction ratio and transmission characteristics. Using terahertz time-domain spectroscopy (THz-TDS), a fabricated polarizer is characterized, with extinction ratios greater than 50 dB and transmission losses below 1 dB reported in the 0.2-1.1 THz frequency range. These characteristics can be improved by further tuning the polarizer parameters such as the pitch, metal film thickness, and lateral displacement.
Photopatterned materials in bioanalytical microfluidic technology
Tentori, Augusto M.; Herr, Amy E.
2011-01-01
Microfluidic technologies are playing an increasingly important role in biological inquiry. Sophisticated approaches to the microanalysis of biological specimens rely, in part, on the fine fluid and material control offered by microtechnology, as well as a sufficient capacity for systems integration. A suite of techniques that utilize photopatterning of polymers on fluidic surfaces, within fluidic volumes, and as primary device structures underpins recent technological innovation in bioanalysis. Well-characterized photopatterning approaches enable previously fabricated or commercially fabricated devices to be customized by the user in a straight-forward manner, making the tools accessible to laboratories that do not focus on microfabrication technology innovation. In this review of recent advances, we summarize reported microfluidic devices with photopatterned structures and regions as platforms for a diverse set of biological measurements and assays. PMID:21857772
Blueprinting macromolecular electronics.
Palma, Carlos-Andres; Samorì, Paolo
2011-06-01
Recently, by mastering either top-down or bottom-up approaches, tailor-made macromolecular nano-objects with semiconducting properties have been fabricated. These engineered nanostructures for organic electronics are based on conjugated systems predominantly made up of sp²-hybridized carbon, such as graphene nanoribbons. Here, we describe developments in a selection of these nanofabrication techniques, which include graphene carving, stimulus-induced synthesis of conjugated polymers and surface-assisted synthesis. We also assess their potential to reproduce chemically and spatially precise molecular arrangements, that is, molecular blueprints. In a broad context, the engineering of a molecular blueprint represents the fabrication of an integrated all-organic macromolecular electronic circuit. In this Perspective, we suggest chemical routes, as well as convergent on-surface synthesis and microfabrication approaches, for the ultimate goal of bringing the field closer to technology.
NASA Astrophysics Data System (ADS)
Kitsara, Maria; Cirera, Josep Maria; Aller-Pellitero, Miguel; Sabaté, Neus; Punter, Jaume; Colomer-Farrarons, Jordi; Miribel-Català, Pere; del Campo, F. Javier
2015-06-01
The development of a low-cost multiparametric platform for enzymatic electrochemical biosensing that can be integrated in a disposable, energy autonomous analytical device is the target of the current work. We propose a technology to fabricate nano-electrodes and ultimately biosensors on flexible polymeric-based substrates (cyclo olefin polymer, and polyimide) using standard microfabrication (step and repeat lithography and lift-off) and rapid prototyping techniques (blade cutting). Our target is towards the fabrication of a miniaturized prototype that can work with small sample volumes in the range of 5-10μL without the need for external pumps for sample loading and handling. This device can be used for the simultaneous detection of metabolites such as glucose, cholesterol and triglycerides for the early diagnosis of diabetes.
FORMING SELF-ASSEMBLED CELL ARRAYS AND MEASURING THE OXYGEN CONSUMPTION RATE OF A SINGLE LIVE CELL.
Etzkorn, James R; McQuaide, Sarah C; Anderson, Judy B; Meldrum, Deirdre R; Parviz, Babak A
2009-06-01
We report a method for forming arrays of live single cells on a chip using polymer micro-traps made of SU8. We have studied the toxicity of the microfabricated structures and the associated environment for two cell lines. We also report a method for measuring the oxygen consumption rate of a single cell using optical interrogation of molecular oxygen sensors placed in micromachined micro-wells by temporarily sealing the cells in the micro-traps. The new techniques presented here add to the collection of tools available for performing "single-cell" biology. A single-cell self-assembly yield of 61% was achieved with oxygen draw down rates of 0.83, 0.82, and 0.71 fmol/minute on three isolated live A549 cells.
FORMING SELF-ASSEMBLED CELL ARRAYS AND MEASURING THE OXYGEN CONSUMPTION RATE OF A SINGLE LIVE CELL
Etzkorn, James R.; McQuaide, Sarah C.; Anderson, Judy B.; Meldrum, Deirdre R.; Parviz, Babak A.
2010-01-01
We report a method for forming arrays of live single cells on a chip using polymer micro-traps made of SU8. We have studied the toxicity of the microfabricated structures and the associated environment for two cell lines. We also report a method for measuring the oxygen consumption rate of a single cell using optical interrogation of molecular oxygen sensors placed in micromachined micro-wells by temporarily sealing the cells in the micro-traps. The new techniques presented here add to the collection of tools available for performing “single-cell” biology. A single-cell self-assembly yield of 61% was achieved with oxygen draw down rates of 0.83, 0.82, and 0.71 fmol/minute on three isolated live A549 cells. PMID:20694048
Conducting Polymer 3D Microelectrodes
Sasso, Luigi; Vazquez, Patricia; Vedarethinam, Indumathi; Castillo-León, Jaime; Emnéus, Jenny; Svendsen, Winnie E.
2010-01-01
Conducting polymer 3D microelectrodes have been fabricated for possible future neurological applications. A combination of micro-fabrication techniques and chemical polymerization methods has been used to create pillar electrodes in polyaniline and polypyrrole. The thin polymer films obtained showed uniformity and good adhesion to both horizontal and vertical surfaces. Electrodes in combination with metal/conducting polymer materials have been characterized by cyclic voltammetry and the presence of the conducting polymer film has shown to increase the electrochemical activity when compared with electrodes coated with only metal. An electrochemical characterization of gold/polypyrrole electrodes showed exceptional electrochemical behavior and activity. PC12 cells were finally cultured on the investigated materials as a preliminary biocompatibility assessment. These results show that the described electrodes are possibly suitable for future in-vitro neurological measurements. PMID:22163508
Optical micromachined ultrasound transducers (OMUT)--a new approach for high-frequency transducers.
Tadayon, Mohammad Amin; Ashkenazi, Shai
2013-09-01
The sensitivity and reliability of piezoelectric ultrasound transducers severely degrade in applications requiring high frequency and small element size. Alternative technologies such as capacitive micromachined ultrasound transducers (CMUT) and optical sensing and generation of ultrasound have been proposed and studied for several decades. In this paper, we present a new type of device based on optical micromachined ultrasound transducer (OMUT) technology. OMUTs rely on microfabrication techniques to construct micrometerscale air cavities capped by an elastic membrane. A modified photoresist bonding process has been developed to facilitate the fabrication of these devices. We will describe the design, fabrication, and testing of prototype OMUT devices which implement a receive-only function. Future design modifications are proposed for incorporating complete transmit¿receive functionality in a single element.
First centenary of Röntgen's discovery of X-rays
NASA Astrophysics Data System (ADS)
Valkovic, V.
1996-04-01
Usually it takes a decade or even several decades, from a discovery to its practical applications. This was not the case with X-rays; they were widely applied in medical and industrial radiography within a year of their discovery in 1895 by W.C. Röntgen. Today, X-ray analysis covers a wide range of techniques and fields of applications: from deduction of atomic arrangements by observation of diffraction phenomena to measurements of trace element concentration levels, distributions and maps by measuring fluorescence, X-ray attenuation or scattering. Although the contribution of analytical applications of X-rays to the present knowledge is difficult to surpass, modern application cover a wide range of activities from three-dimensional microfabrication using synchroton radiation to collecting information from the deep space by X-ray astronomy.
Electrochemical imaging of cells and tissues
Lin, Tzu-En; Rapino, Stefania; Girault, Hubert H.
2018-01-01
The technological and experimental progress in electrochemical imaging of biological specimens is discussed with a view on potential applications for skin cancer diagnostics, reproductive medicine and microbial testing. The electrochemical analysis of single cell activity inside cell cultures, 3D cellular aggregates and microtissues is based on the selective detection of electroactive species involved in biological functions. Electrochemical imaging strategies, based on nano/micrometric probes scanning over the sample and sensor array chips, respectively, can be made sensitive and selective without being affected by optical interference as many other microscopy techniques. The recent developments in microfabrication, electronics and cell culturing/tissue engineering have evolved in affordable and fast-sampling electrochemical imaging platforms. We believe that the topics discussed herein demonstrate the applicability of electrochemical imaging devices in many areas related to cellular functions. PMID:29899947
Gold Nanoparticles for Neural Prosthetics Devices
Zhang, Huanan; Shih, Jimmy; Zhu, Jian; Kotov, Nicholas A.
2012-01-01
Treatments of neurological diseases and the realization of brain-computer interfaces require ultrasmall electrodes which are “invisible” to resident immune cells. Functional electrodes smaller than 50μm are impossible to produce with traditional materials due to high interfacial impedance at the characteristic frequency of neural activity and insufficient charge storage capacity. The problem can be resolved by using gold nanoparticle nanocomposites. Careful comparison indicates that layer-by-layer assembled films from Au NPs provide more than threefold improvement in interfacial impedance and one order of magnitude increase in charge storage capacity. Prototypes of microelectrodes could be made using traditional photolithography. Integration of unique nanocomposite materials with microfabrication techniques opens the door for practical realization of the ultrasmall implantable electrodes. Further improvement of electrical properties is expected when using special shapes of gold nanoparticles. PMID:22734673
Ortega, Ílida; Deshpande, Pallavi; Gill, Andrew A; MacNeil, Sheila; Claeyssens, Frederik
2013-06-01
The aim of this study was to develop a synthetic alternative to the human corneal limbus for use initially as an ex vivo model in which to study corneal stem cell function within a niche environment and ultimately to develop an implantable limbus for future clinical use. Microstereolithography was used for the fabrication of polyethylene glycol diacrylate (PEGDA) based rings on a macroscopic (1.2 cm) scale containing unique microfeatures (pockets) which were then modified with fibronectin to promote cell adhesion. These rings were designed to mimic the limbal area of the eye containing structures of the approximate size and shape of the stem cell microenvironments found in the palisades of Vogt. The attachment of rabbit limbal fibroblasts and rabbit limbal epithelial cells to the PEGDA rings was increased by pretreating the microfabricated structures with biotinylated fibronectin. Cell outgrowth from fibronectin coated microfabricated structures was 50% greater than from rings without structures or fibronectin coating. The cell loaded rings were then placed on an ex vivo wounded cornea model and the outgrowth of cells to form a multilayered epithelium was observed. We suggest this is a new approach to investigating limbal stem cells niches and the first steps towards a new approach for corneal regeneration.
Jet Penetration into a Scaled Microfabricated Stirling Cycle Regenerator
NASA Technical Reports Server (NTRS)
Sun, Liyong; Simon, Terrence W.; Mantell, Susan; Ibrahim, Mournir; Gedeon, David; Tew, Roy
2008-01-01
The cooler and heater adjacent to the regenerator of a Stirling cycle engine have tubes or channels which form jets that pass into the regenerator while diffusing within the matrix. An inactive part of the matrix, beyond the cores of these jets, does not participate fully in the heat transfer between the flow of working fluid and the regenerator matrix material, weakening the regenerator s ability to exchange heat with the working fluid. The objective of the present program is to document this effect on the performance of the regenerator and to develop a model for generalizing the results. However, the small scales of actual Stirling regenerator matrices (on the order of tens of microns) make direct measurements of this effect very difficult. As a result, jet spreading within a regenerator matrix has not been characterized well and is poorly understood. Also, modeling is lacking experimental verification. To address this, a large-scale mockup of thirty times actual scale was constructed and operated under conditions that are dynamically similar to the engine operation. Jet penetration with round jets and slot jets into the microfabricated regenerator geometry are then measured by conventional means. The results are compared with those from a study of spreading of round jets within woven screen regenerator for further documentation of the comparative performance of the microfabricated regenerator geometry.
Ball-grid array architecture for microfabricated ion traps
DOE Office of Scientific and Technical Information (OSTI.GOV)
Guise, Nicholas D., E-mail: nicholas.guise@gtri.gatech.edu; Fallek, Spencer D.; Stevens, Kelly E.
2015-05-07
State-of-the-art microfabricated ion traps for quantum information research are approaching nearly one hundred control electrodes. We report here on the development and testing of a new architecture for microfabricated ion traps, built around ball-grid array (BGA) connections, that is suitable for increasingly complex trap designs. In the BGA trap, through-substrate vias bring electrical signals from the back side of the trap die to the surface trap structure on the top side. Gold-ball bump bonds connect the back side of the trap die to an interposer for signal routing from the carrier. Trench capacitors fabricated into the trap die replace area-intensivemore » surface or edge capacitors. Wirebonds in the BGA architecture are moved to the interposer. These last two features allow the trap die to be reduced to only the area required to produce trapping fields. The smaller trap dimensions allow tight focusing of an addressing laser beam for fast single-qubit rotations. Performance of the BGA trap as characterized with {sup 40}Ca{sup +} ions is comparable to previous surface-electrode traps in terms of ion heating rate, mode frequency stability, and storage lifetime. We demonstrate two-qubit entanglement operations with {sup 171}Yb{sup +} ions in a second BGA trap.« less
NASA Astrophysics Data System (ADS)
Francis, Laurent A.; Gkotsis, Petros; Kilchytska, Valeriya; Tang, Xiaohui; Druart, Sylvain; Raskin, Jean-Pierre; Flandre, Denis
2013-03-01
The impact of different types of radiation on the electromechanical properties of materials used in microfabrication and on the capacitive and piezoresistive transduction mechanisms of MEMS is investigated. MEMS technologies could revolutionize avionics, satellite and space applications provided that the stress conditions which can compromise the reliability of microsystems in these environments are well understood. Initial tests with MEMS revealed a vulnerability of some types of devices to radiation induced dielectric charging, a physical mechanism which also affects microelectronics, however integration of novel functional materials in microfabrication and the current trend to substitute SiO2 with high-k dielectrics in ICs pose new questions regarding reliability in radiation environments. The performance of MEMS devices with moving parts could also degrade due to radiation induced changes in the mechanical properties of the materials. It is thus necessary to investigate the effects of radiation on the properties of thin films used in microfabrication and here we report on tests with γ, high energy protons and fast neutrons radiation. Prototype SOI based MEMS magnetometers which were developed in UCL are also used as test vehicles to investigate radiation effects on the reliability of magnetically actuated and capacitively coupled MEMS.
Micromanipulation and microfabrication for optical microrobotics
NASA Astrophysics Data System (ADS)
Palima, Darwin; Bañas, Andrew Rafael; Vizsnyiczai, Gaszton; Kelemen, Lóránd; Aabo, Thomas; Ormos, Pál.; Glückstad, Jesper
2012-10-01
Robotics can use optics feedback in vision-based control of intelligent robotic guidance systems. With light's miniscule momentum, shrinking robots down to the microscale regime creates opportunities for exploiting optical forces and torques in microrobotic actuation and control. Indeed, the literature on optical trapping and micromanipulation attests to the possibilities for optical microrobotics. This work presents an optical microrobotics perspective on the optical microfabrication and micromanipulation work that we performed. We designed different three-dimensional microstructures and fabricated them by two-photon polymerization. These microstructures were then handled using our biophotonics workstation (BWS) for proof-of-principle demonstrations of optical actuation, akin to 6DOF actuation of robotic micromanipulators. Furthermore, we also show an example of dynamic behavior of the trapped microstructure that can be achieved when using static traps in the BWS. This can be generalized, in the future, towards a structural shaping optimization strategy for optimally controlling microstructures to complement approaches based on lightshaping. We also show that light channeled to microfabricated, free-standing waveguides can be used not only to redirect light for targeted delivery of optical energy but can also for targeted delivery of optical force, which can serve to further extend the manipulation arms in optical robotics. Moreover, light deflection with waveguide also creates a recoil force on the waveguide, which can be exploited for controlling the optical force.
Terry, Jonathan G; Schmüser, Ilka; Underwood, Ian; Corrigan, Damion K; Freeman, Neville J; Bunting, Andrew S; Mount, Andrew R; Walton, Anthony J
2013-12-01
A novel technique for the production of nanoscale electrode arrays that uses standard microfabrication processes and micron-scale photolithography is reported here in detail. These microsquare nanoband edge electrode (MNEE) arrays have been fabricated with highly reproducible control of the key array dimensions, including the size and pitch of the individual elements and, most importantly, the width of the nanoband electrodes. The definition of lateral features to nanoscale dimensions typically requires expensive patterning techniques that are complex and low-throughput. However, the fabrication methodology used here relies on the fact that vertical dimensions (i.e. layer thicknesses) have long been manufacturable at the nanoscale using thin film deposition techniques that are well established in mainstream microelectronics. The authors report for the first time two aspects that highlight the particular suitability of these MNEE array systems for probe monolayer biosensing. The first is simulation, which shows the enhanced sensitivity to the redox reaction of the solution redox couple. The second is the enhancement of probe film functionalisation observed for the probe film model molecule, 6-mercapto-1-hexanol compared with microsquare electrodes. Such surface modification for specific probe layer biosensing and detection is of significance for a wide range of biomedical and other sensing and analytical applications.
Microfabricated Modular Scale-Down Device for Regenerative Medicine Process Development
Reichen, Marcel; Macown, Rhys J.; Jaccard, Nicolas; Super, Alexandre; Ruban, Ludmila; Griffin, Lewis D.; Veraitch, Farlan S.; Szita, Nicolas
2012-01-01
The capacity of milli and micro litre bioreactors to accelerate process development has been successfully demonstrated in traditional biotechnology. However, for regenerative medicine present smaller scale culture methods cannot cope with the wide range of processing variables that need to be evaluated. Existing microfabricated culture devices, which could test different culture variables with a minimum amount of resources (e.g. expensive culture medium), are typically not designed with process development in mind. We present a novel, autoclavable, and microfabricated scale-down device designed for regenerative medicine process development. The microfabricated device contains a re-sealable culture chamber that facilitates use of standard culture protocols, creating a link with traditional small-scale culture devices for validation and scale-up studies. Further, the modular design can easily accommodate investigation of different culture substrate/extra-cellular matrix combinations. Inactivated mouse embryonic fibroblasts (iMEF) and human embryonic stem cell (hESC) colonies were successfully seeded on gelatine-coated tissue culture polystyrene (TC-PS) using standard static seeding protocols. The microfluidic chip included in the device offers precise and accurate control over the culture medium flow rate and resulting shear stresses in the device. Cells were cultured for two days with media perfused at 300 µl.h−1 resulting in a modelled shear stress of 1.1×10−4 Pa. Following perfusion, hESC colonies stained positively for different pluripotency markers and retained an undifferentiated morphology. An image processing algorithm was developed which permits quantification of co-cultured colony-forming cells from phase contrast microscope images. hESC colony sizes were quantified against the background of the feeder cells (iMEF) in less than 45 seconds for high-resolution images, which will permit real-time monitoring of culture progress in future experiments. The presented device is a first step to harness the advantages of microfluidics for regenerative medicine process development. PMID:23284952
Matharu, Zimple; Daggumati, Pallavi; Wang, Ling; Dorofeeva, Tatiana S; Li, Zidong; Seker, Erkin
2017-04-19
Nanoporous gold (np-Au) electrode coatings significantly enhance the performance of electrochemical nucleic acid biosensors because of their three-dimensional nanoscale network, high electrical conductivity, facile surface functionalization, and biocompatibility. Contrary to planar electrodes, the np-Au electrodes also exhibit sensitive detection in the presence of common biofouling media due to their porous structure. However, the pore size of the nanomatrix plays a critical role in dictating the extent of biomolecular capture and transport. Small pores perform better in the case of target detection in complex samples by filtering out the large nonspecific proteins. On the other hand, larger pores increase the accessibility of target nucleic acids in the nanoporous structure, enhancing the detection limits of the sensor at the expense of more interference from biofouling molecules. Here, we report a microfabricated np-Au multiple electrode array that displays a range of electrode morphologies on the same chip for identifying feature sizes that reduce the nonspecific adsorption of proteins but facilitate the permeation of target DNA molecules into the pores. We demonstrate the utility of the electrode morphology library in studying DNA functionalization and target detection in complex biological media with a special emphasis on revealing ranges of electrode morphologies that mutually enhance the limit of detection and biofouling resilience. We expect this technique to assist in the development of high-performance biosensors for point-of-care diagnostics and facilitate studies on the electrode structure-property relationships in potential applications ranging from neural electrodes to catalysts.
A paper-based microbial fuel cell: instant battery for disposable diagnostic devices.
Fraiwan, Arwa; Mukherjee, Sayantika; Sundermier, Steven; Lee, Hyung-Sool; Choi, Seokheun
2013-11-15
We present a microfabricated paper-based microbial fuel cell (MFC) generating a maximum power of 5.5 μW/cm(2). The MFC features (1) a paper-based proton exchange membrane by infiltrating sulfonated sodium polystyrene sulfonate and (2) micro-fabricated paper chambers by patterning hydrophobic barriers of photoresist. Once inoculum and catholyte were added to the MFC, a current of 74 μA was generated immediately. This paper-based MFC has the advantages of ease of use, low production cost, and high portability. The voltage produced was increased by 1.9 × when two MFC devices were stacked in series, while operating lifetime was significantly enhanced in parallel. Copyright © 2013 Elsevier B.V. All rights reserved.
NASA Astrophysics Data System (ADS)
Akopova, T. A.; Demina, T. S.; Bagratashvili, V. N.; Bardakova, K. N.; Novikov, M. M.; Selezneva, I. I.; Istomin, A. V.; Svidchenko, E. A.; Cherkaev, G. V.; Surin, N. M.; Timashev, P. S.
2015-07-01
Chitosans with various degrees of deacetylation and molecular weights and their allyl substituted derivatives were obtained through a solvent-free reaction under shear deformation in an extruder. Structure and physical-chemical analysis of the samples were carried out using nuclear magnetic resonance (NMR), ultraviolet (UV) and infrared radiation (IR) spectroscopy. Photosensitive materials based on the synthesized polymers were successfully used for microfabrication of 3D well-defined architectonic structures by laser stereolithography. Study on the metabolic activity of NCTC L929 cultured in the presence of the cured chitosan extracts indicates that the engineered biomaterials could support adhesion, spreading and growth of adherent-dependent cells, and thus could be considered as biocompatible scaffolds.
Microfabricated structures with electrical isolation and interconnections
NASA Technical Reports Server (NTRS)
Clark, William A. (Inventor); Juneau, Thor N. (Inventor); Roessig, Allen W. (Inventor); Lemkin, Mark A. (Inventor)
2001-01-01
The invention is directed to a microfabricated device. The device includes a substrate that is etched to define mechanical structures at least some of which are anchored laterally to the remainder of the substrate. Electrical isolation at points where mechanical structures are attached to the substrate is provided by filled isolation trenches. Filled trenches may also be used to electrically isolate structure elements from each other at points where mechanical attachment of structure elements is desired. The performance of microelectromechanical devices is improved by 1) having a high-aspect-ratio between vertical and lateral dimensions of the mechanical elements, 2) integrating electronics on the same substrate as the mechanical elements, 3) good electrical isolation among mechanical elements and circuits except where electrical interconnection is desired.
Atom detection and photon production in a scalable, open, optical microcavity.
Trupke, M; Goldwin, J; Darquié, B; Dutier, G; Eriksson, S; Ashmore, J; Hinds, E A
2007-08-10
A microfabricated Fabry-Perot optical resonator has been used for atom detection and photon production with less than 1 atom on average in the cavity mode. Our cavity design combines the intrinsic scalability of microfabrication processes with direct coupling of the cavity field to single-mode optical waveguides or fibers. The presence of the atom is seen through changes in both the intensity and the noise characteristics of probe light reflected from the cavity input mirror. An excitation laser passing transversely through the cavity triggers photon emission into the cavity mode and hence into the single-mode fiber. These are first steps toward building an optical microcavity network on an atom chip for applications in quantum information processing.
Jung, Hyukjin; Jeong, Ki-Hun
2009-08-17
A microfabricated compound eye, comparable to a natural compound eye shows a spherical arrangement of integrated optical units called artificial ommatidia. Each consists of a self-aligned microlens and waveguide. The increase of waveguide length is imperative to obtain high resolution images through an artificial compound eye for wide field-of - view imaging as well as fast motion detection. This work presents an effective method for increasing the waveguide length of artificial ommatidium using a laser induced self-writing process in a photosensitive polymer resin. The numerical and experimental results show the uniform formation of waveguides and the increment of waveguide length over 850 microm. (c) 2009 Optical Society of America
Microfabricated magnetic traps for single molecule manipulation and measurement
NASA Astrophysics Data System (ADS)
Mirowski, Elizabeth; Moreland, John; Russek, Stephen; Donahue, Michael
2003-03-01
We have microfabricated patterned magnetic thin film traps for capturing superparamagnetic beads in microfluidic cells. The traps are based on a novel concept of using a magnetic force microsope cantilever for transporting magnetic beads from one trap to another along the surface of a thin silicon nitride membrane. We specifically address the optimal design criteria for the traps. In addition, we present measurements of the forces on a bead (attached to a functionalized cantilever tip) as a function of its position near the trap. Equivalent spring constants of various trap geometries are extrapolated from the force measurements. The force measurements will be compared to micromagnetic modelling of the system as well as the Brownian motion of the bead in the trap.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Jensen, David S.; Kanyal, Supriya S.; Madaan, Nitesh
Herein we apply a suite of surface/materials analytical tools to characterize some of the materials created in the production of microfabricated thin layer chromatography plates. Techniques used include X-ray photoelectron spectroscopy (XPS), valence band spectroscopy, static time-of-flight secondary ion spectrometry (ToF-SIMS) in both positive and negative ion modes, Rutherford backscattering spectroscopy (RBS), and helium ion microscopy (HIM). Materials characterized include: the Si(100) substrate with native oxide: Si/SiO2, alumina (35 nm) deposited as a diffusion barrier on the Si/SiO2: Si/SiO2/Al2O3, iron (6 nm) thermally evaporated on the Al2O3: Si/SiO2/Al2O3/Fe, the iron film annealed in H2 to make Fe catalyst nanoparticles: Si/SiO2/Al2O3/Fe(NP),more » and carbon nanotubes (CNTs) grown from the Fe nanoparticles: Si/SiO2/Al2O3/Fe(NP)/CNT. The Fe thin films and nanoparticles are found in an oxidized state. Some of the analyses of the CNTs/CNT forests reported appear to be unique: the CNT forest appears to exhibit an interesting ‘channeling’ phenomenon by RBS, we observe an odd-even effect in the ToF-SIMS spectra of Cn- species for n = 1 – 6, with ions at even n showing greater intensity than the neighboring signals, and ions with n ≥ 6 showing a steady decrease in intensity, and valence band characterization of CNTs using X-radiation is reported. The information obtained from the combination of the different analytical tools provides a more complete understanding of our materials than a single technique, which is analogous to the story of ‘The Blind Men and the Elephant’. (Of course there is increasing emphasis on the use of multiple characterization tools in surface and materials analysis.) The raw XPS and ToF-SIMS spectra from this study will be submitted to Surface Science Spectra for archiving.« less
Placenta-on-a-chip: a novel platform to study the biology of the human placenta.
Lee, Ji Soo; Romero, Roberto; Han, Yu Mi; Kim, Hee Chan; Kim, Chong Jai; Hong, Joon-Seok; Huh, Dongeun
2016-01-01
Studying the biology of the human placenta represents a major experimental challenge. Although conventional cell culture techniques have been used to study different types of placenta-derived cells, current in vitro models have limitations in recapitulating organ-specific structure and key physiological functions of the placenta. Here we demonstrate that it is possible to leverage microfluidic and microfabrication technologies to develop a microengineered biomimetic model that replicates the architecture and function of the placenta. A "Placenta-on-a-Chip" microdevice was created by using a set of soft elastomer-based microfabrication techniques known as soft lithography. This microsystem consisted of two polydimethylsiloxane (PDMS) microfluidic channels separated by a thin extracellular matrix (ECM) membrane. To reproduce the placental barrier in this model, human trophoblasts (JEG-3) and human umbilical vein endothelial cells (HUVECs) were seeded onto the opposite sides of the ECM membrane and cultured under dynamic flow conditions to form confluent epithelial and endothelial layers in close apposition. We tested the physiological function of the microengineered placental barrier by measuring glucose transport across the trophoblast-endothelial interface over time. The permeability of the barrier study was analyzed and compared to that obtained from acellular devices and additional control groups that contained epithelial or endothelial layers alone. Our microfluidic cell culture system provided a tightly controlled fluidic environment conducive to the proliferation and maintenance of JEG-3 trophoblasts and HUVECs on the ECM scaffold. Prolonged culture in this model produced confluent cellular monolayers on the intervening membrane that together formed the placental barrier. This in vivo-like microarchitecture was also critical for creating a physiologically relevant effective barrier to glucose transport. Quantitative investigation of barrier function was conducted by calculating permeability coefficients and metabolic rates in varying conditions of barrier structure. The rates of glucose transport and metabolism were consistent with previously reported in vivo observations. The "Placenta-on-a-Chip" microdevice described herein provides new opportunities to simulate and analyze critical physiological responses of the placental barrier. This system may be used to address the major limitations of existing placenta model systems and serve to enable research platforms for reproductive biology and medicine.
NASA Astrophysics Data System (ADS)
Żelaźniewicz, Andrzej; Kromuszczyńska, Olga; Biegała, Natalia
2013-12-01
Żelaźniewicz, A., Kromuszczyńska, O. and Biegała, N. 2013. Quartz c-axis fabrics in constrictionally strained orthogneisses: implications for the evolution of the Orlica-Śnieżnik Dome, the Sudetes, Poland. Acta Geologica Polonica, 63
Trends in the development of microfluidic cell biochips for in vitro hepatotoxicity.
Baudoin, Régis; Corlu, Anne; Griscom, Laurent; Legallais, Cécile; Leclerc, Eric
2007-06-01
Current developments in the technological fields of liver tissue engineering, bioengineering, biomechanics, microfabrication and microfluidics have lead to highly complex and pertinent new tools called "cell biochips" for in vitro toxicology. The purpose of "cell biochips" is to mimic organ tissues in vitro in order to partially reduce the amount of in vivo testing. These "cell biochips" consist of microchambers containing engineered tissue and living cell cultures interconnected by a microfluidic network, which allows the control of microfluidic flows for dynamic cultures, by continuous feeding of nutrients to cultured cells and waste removal. Cell biochips also allow the control of physiological contact times of diluted molecules with the tissues and cells, for rapid testing of sample preparations or specific addressing. Cell biochips can be situated between in vitro and in vivo testing. These types of systems can enhance functionality of cells by mimicking the tissue architecture complexities when compared to in vitro analysis but at the same time present a more rapid and simple process when compared to in vivo testing procedures. In this paper, we first introduce the concepts of microfluidic and biochip systems based on recent progress in microfabrication techniques used to mimic liver tissue in vitro. This includes progress and understanding in biomaterials science (cell culture substrate), biomechanics (dynamic cultures conditions) and biology (tissue engineering). The development of new "cell biochips" for chronic toxicology analysis of engineered tissues can be achieved through the combination of these research domains. Combining these advanced research domains, we then present "cell biochips" that allow liver chronic toxicity analysis in vitro on engineered tissues. An extension of the "cell biochip" idea has also allowed "organ interactions on chip", which can be considered as a first step towards the replacement of animal testing using a combined liver/lung organ model.
A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor
Li, Guanglei; Sun, Zhenyuan; Wang, Junbo; Chen, Deyong; Chen, Lianhong; Xu, Chao; Qi, Wenjie; Zheng, Yu
2018-01-01
This paper presents an electrochemical seismic sensor in which paraylene was used as a substrate and insulating layer of micro-fabricated electrodes, enabling the detection of seismic signals with enhanced sensitivities in comparison to silicon-based counterparts. Based on microfabrication, paralene-based electrochemical seismic sensors were fabricated in which the thickness of the insulating spacer was 6.7 μm. Compared to silicon-based counterparts with ~100 μm insulating layers, the parylene-based devices produced higher sensitivities of 490.3 ± 6.1 V/(m/s) vs. 192.2 ± 1.9 V/(m/s) at 0.1 Hz, 4764.4 ± 18 V/(m/s) vs. 318.9 ± 6.5 V/(m/s) at 1 Hz, and 4128.1 ± 38.3 V/(m/s) vs. 254.5 ± 4.2 V/(m/s) at 10 Hz. In addition, the outputs of the parylene vs. silicon devices in response to two transit inputs were compared, producing peak responses of 2.97 V vs. 0.22 V and 2.41 V vs. 0.19 V, respectively. Furthermore, the self-noises of parylene vs. silicon-based devices were compared as follows: −82.3 ± 3.9 dB vs. −90.4 ± 9.4 dB at 0.1 Hz, −75.7 ± 7.3 dB vs. −98.2 ± 9.9 dB at 1 Hz, and −62.4 ± 7.7 dB vs. −91.1 ± 8.1 dB at 10 Hz. The developed parylene-based electrochemical seismic sensors may function as an enabling technique for further detection of seismic motions in various applications. PMID:29641455
Microfabricated Genomic Analysis System
NASA Technical Reports Server (NTRS)
Gonda, Steve; Elms, Rene
2005-01-01
Genetic sequencing and many genetic tests and assays require electrophoretic separation of DNA. In this technique, DNA fragments are separated by size as they migrate through a sieving gel under the influence of an applied electric field. In order to conduct these analyses on-orbit, it is essential to acquire the capability to efficiently perform electrophoresis in a microgravity environment. Conventional bench top electrophoresis equipment is large and cumbersome and does not lead itself to on-orbit utilization. Much of the previous research regarding on-orbit electrophoresis involved altering conventional electrophoresis equipment for bioprocessing, purification, and/or separation technology applications. A new and more efficient approach to on-orbit electrophoresis is the use of a microfabricated electrophoresis platform. These platforms are much smaller, less expensive to produce and operate, use less power, require smaller sample sizes (nanoliters), and achieve separation in a much shorter distance (a few centimeters instead of 10 s or 100 s of centimeters.) In contrast to previous applications, this platform would be utilized as an analytical tool for life science/medical research, environmental monitoring, and medical diagnoses. Identification of infectious agents as well as radiation related damage are significant to NASA s efforts to maintain, study, and monitor crew health during and in support of near-Earth and interplanetary missions. The capability to perform genetic assays on-orbit is imperative to conduct relevant and insightful biological and medical research, as well as continuing NASA s search for life elsewhere. This technology would provide an essential analytical tool for research conducted in a microgravity environment (Shuttle, ISS, long duration/interplanetary missions.) In addition, this technology could serve as a critical and invaluable component of a biosentinel system to monitor space environment genotoxic insults to include radiation.
Electrochemical detection for microscale analytical systems: a review.
Wang, Joseph
2002-02-11
As the field of chip-based microscale systems continues its rapid growth, there are urgent needs for developing compatible detection modes. Electrochemistry detection offers considerable promise for such microfluidic systems, with features that include remarkable sensitivity, inherent miniaturization and portability, independence of optical path length or sample turbidity, low cost, low-power requirements and high compatibility with advanced micromachining and microfabrication technologies. This paper highlights recent advances, directions and key strategies in controlled-potential electrochemical detectors for miniaturized analytical systems. Subjects covered include the design and integration of the electrochemical detection system, its requirements and operational principles, common electrode materials, derivatization reactions, electrical-field decouplers, typical applications and future prospects. It is expected that electrochemical detection will become a powerful tool for microscale analytical systems and will facilitate the creation of truly portable (and possibly disposable) devices.
NASA Astrophysics Data System (ADS)
Alem, Orang; Sander, Tilmann H.; Mhaskar, Rahul; LeBlanc, John; Eswaran, Hari; Steinhoff, Uwe; Okada, Yoshio; Kitching, John; Trahms, Lutz; Knappe, Svenja
2015-06-01
Following the rapid progress in the development of optically pumped magnetometer (OPM) technology for the measurement of magnetic fields in the femtotesla range, a successful assembly of individual sensors into an array of nearly identical sensors is within reach. Here, 25 microfabricated OPMs with footprints of 1 cm3 were assembled into a conformal array. The individual sensors were inserted into three flexible belt-shaped holders and connected to their respective light sources and electronics, which reside outside a magnetically shielded room, through long optical and electrical cables. With this setup the fetal magnetocardiogram of a pregnant woman was measured by placing two sensor belts over her abdomen and one belt over her chest. The fetal magnetocardiogram recorded over the abdomen is usually dominated by contributions from the maternal magnetocardiogram, since the maternal heart generates a much stronger signal than the fetal heart. Therefore, signal processing methods have to be applied to obtain the pure fetal magnetocardiogram: orthogonal projection and independent component analysis. The resulting spatial distributions of fetal cardiac activity are in good agreement with each other. In a further exemplary step, the fetal heart rate was extracted from the fetal magnetocardiogram. Its variability suggests fetal activity. We conclude that microfabricated optically pumped magnetometers operating at room temperature are capable of complementing or in the future even replacing superconducting sensors for fetal magnetocardiography measurements.
Kennedy, Daniel J.; Seltzer, Scott J.; Jiménez-Martínez, Ricardo; Ring, Hattie L.; Malecek, Nicolas S.; Knappe, Svenja; Donley, Elizabeth A.; Kitching, John; Bajaj, Vikram S.; Pines, Alexander
2017-01-01
Low thermal-equilibrium nuclear spin polarizations and the need for sophisticated instrumentation render conventional nuclear magnetic resonance (NMR) spectroscopy and imaging (MRI) incompatible with small-scale microfluidic devices. Hyperpolarized 129Xe gas has found use in the study of many materials but has required very large and expensive instrumentation. Recently a microfabricated device with modest instrumentation demonstrated all-optical hyperpolarization and detection of 129Xe gas. This device was limited by 129Xe polarizations less than 1%, 129Xe NMR signals smaller than 20 nT, and transport of hyperpolarized 129Xe over millimeter lengths. Higher polarizations, versatile detection schemes, and flow of 129Xe over larger distances are desirable for wider applications. Here we demonstrate an ultra-sensitive microfabricated platform that achieves 129Xe polarizations reaching 7%, NMR signals exceeding 1 μT, lifetimes up to 6 s, and simultaneous two-mode detection, consisting of a high-sensitivity in situ channel with signal-to-noise of 105 and a lower-sensitivity ex situ detection channel which may be useful in a wider variety of conditions. 129Xe is hyperpolarized and detected in locations more than 1 cm apart. Our versatile device is an optimal platform for microfluidic magnetic resonance in particular, but equally attractive for wider nuclear spin applications benefitting from ultra-sensitive detection, long coherences, and simple instrumentation. PMID:28266629
A microfabricated bio-sensor for erythrocytes deformability and volume distributions analysis
NASA Astrophysics Data System (ADS)
Bransky, Avishay; Korin, Natanel; Nemirovski, Yael; Dinnar, Uri
2007-12-01
The deformability of erythrocytes is of great importance for oxygen delivery in the microcirculation. Reduced RBC deformability is associated with several types of hemolytic anaemias, malaria, sepsis and diabetes. Aging of erythrocytes is also associated with loss of deformability as well as reduction in cell volume. An automated rheoscope has been developed, utilizing a microfabricated glass flow cell, high speed camera and advanced image-processing software. RBCs suspended in a high viscosity medium were filmed flowing through a microchannel. The system produces valuable data such as velocity profiles of RBCs, spatial distribution within the microchannel, cell volume and deformation index (DI) curves. The variation of DI across the channel height, due to change in shear stress, was measured for the first time. Such DI curves were obtained for normal and Thalassemia RBCs and their diagnostic potential was demonstrated. The spatial distribution and velocity of RBCs and rigid microspheres were measured. Both RBC and rigid spheres showed enhanced inward lateral migration, however the RBCs form a depletion region at the center of flow. The volume and surface area of the flowing cells have been estimated based on a fluid mechanics model and experimental results and fell within the normal range. Hence, the system developed, provides means for examining the behavior of individual RBCs in microchannels, and may serve as a microfabricated diagnostic device for deformability and volume measurements.
Kennedy, Daniel J.; Seltzer, Scott J.; Jiménez-Martínez, Ricardo; ...
2017-03-07
Low thermal-equilibrium nuclear spin polarizations and the need for sophisticated instrumentation render conventional nuclear magnetic resonance (NMR) spectroscopy and imaging (MRI) incompatible with small-scale microfluidic devices. Hyperpolarized 129Xe gas has found use in the study of many materials but has required very large and expensive instrumentation. Recently a microfabricated device with modest instrumentation demonstrated all-optical hyperpolarization and detection of 129Xe gas. This device was limited by 129Xe polarizations less than 1%, 129Xe NMR signals smaller than 20 nT, and transport of hyperpolarized 129Xe over millimeter lengths. Higher polarizations, versatile detection schemes, and flow of 129Xe over larger distances are desirablemore » for wider applications. Here we demonstrate an ultra-sensitive microfabricated platform that achieves 129Xe polarizations reaching 7%, NMR signals exceeding 1 μT, lifetimes up to 6 s, and simultaneous two-mode detection, consisting of a high-sensitivity in situ channel with signal-to-noise of 10 5 and a lower-sensitivity ex situ detection channel which may be useful in a wider variety of conditions. 129Xe is hyperpolarized and detected in locations more than 1 cm apart. Our versatile device is an optimal platform for microfluidic magnetic resonance in particular, but equally attractive for wider nuclear spin applications benefitting from ultra-sensitive detection, long coherences, and simple instrumentation.« less
Stripping of acetone from water with microfabricated and membrane gas-liquid contactors.
Constantinou, Achilleas; Ghiotto, Francesco; Lam, Koon Fung; Gavriilidis, Asterios
2014-01-07
Stripping of acetone from water utilizing nitrogen as a sweeping gas in co-current flow was conducted in a microfabricated glass/silicon gas-liquid contactor. The chip consisted of a microchannel divided into a gas and a liquid chamber by 10 μm diameter micropillars located next to one of the channel walls. The channel length was 35 mm, the channel width was 220 μm and the microchannel depth 100 μm. The micropillars were wetted by the water/acetone solution and formed a 15 μm liquid film between them and the nearest channel wall, leaving a 195 μm gap for gas flow. In addition, acetone stripping was performed in a microchannel membrane contactor, utilizing a hydrophobic PTFE membrane placed between two microstructured acrylic plates. Microchannels for gas and liquid flows were machined in the plates and had a depth of 850 μm and 200 μm respectively. In both contactors the gas/liquid interface was stabilized: in the glass/silicon contactor by the hydrophilic micropillars, while in the PTFE/acrylic one by the hydrophobic membrane. For both contactors separation efficiency was found to increase by increasing the gas/liquid flow rate ratio, but was not affected when increasing the inlet acetone concentration. Separation was more efficient in the microfabricated contactor due to the very thin liquid layer employed.
Development and Application of Microfabricated Chemical Gas Sensors For Aerospace Applications
NASA Technical Reports Server (NTRS)
Hunter, G. W.; Neudeck, P. G.; Fralick, G.; Thomas, V.; Liu, C. C.; Wu, Q. H.; Sawayda, M. S.; Jin, A.; Hammond, J.; Makel, D.;
1990-01-01
Aerospace applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. In particular, factors such as minimal sensor size, weight, and power consumption are particularly important. Development areas which have potential aerospace applications include launch vehicle leak detection, engine health monitoring and control, and fire detection. Sensor development for these applications is based on progress in three types of technology: 1) Micromachining and microfabrication (Microsystem) technology to fabricate miniaturized sensors. 2) The use of nanocrystalline materials to develop sensors with improved stability combined with higher sensitivity. 3) The development of high temperature semiconductors, especially silicon carbide. Sensor development for each application involves its own challenges in the fields of materials science and fabrication technology. This paper discusses the needs of space applications and the point-contact sensor technology being developed to address these needs. Sensors to measure hydrogen, hydrocarbons, nitrogen oxides (Nox, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. Demonstration and application these sensor technologies will be described. The demonstrations range from use of a microsystem based hydrogen sensor on the Shuttle to engine demonstration of a nanocrystalline based sensor for NO, detection. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.
Development of Microfabricated Chemical Gas Sensors and Sensor Arrays for Aerospace Applications
NASA Technical Reports Server (NTRS)
Hunter, G. W.; Neudeck, P. G.; Fralick, G.; Thomas, V.; Liu, C. C.; Wu, W. H.; Ward, B.; Makel, D.
2002-01-01
Aerospace applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. In particular, factors such as minimal sensor size, weight, and power consumption are particularly important. Development areas which have potential aerospace applications include launch vehicle leak detection, engine health monitoring, fire detection, and environmental monitoring. Sensor development for these applications is based on progress in three types of technology: 1) Micromachining and microfabrication (Microsystem) technology to fabricate miniaturized sensors. 2) The use of nanocrystalline materials to develop sensors with improved stability combined with higher sensitivity. 3) The development of high temperature semiconductors, especially silicon carbide. However, due to issues of selectivity and cross-sensitivity, individual sensors are limited in the amount of information that they can provide in environments that contain multiple chemical species. Thus, sensor arrays are being developed to address detection needs in such multi-species environments. This paper discusses the needs of space applications as well as the point-contact sensor technology and sensor arrays being developed to address these needs. Sensors to measure hydrogen, hydrocarbons, hydrazine, nitrogen oxides (NO,), carbon monoxide, oxygen, and carbon dioxide are being developed as well as arrays for leak, fire, and emissions detection. Demonstrations of the technology will also be discussed. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.
Quantifying Spiral Ganglion Neurite and Schwann Behavior on Micropatterned Polymer Substrates.
Cheng, Elise L; Leigh, Braden; Guymon, C Allan; Hansen, Marlan R
2016-01-01
The first successful in vitro experiments on the cochlea were conducted in 1928 by Honor Fell (Fell, Arch Exp Zellforsch 7(1):69-81, 1928). Since then, techniques for culture of this tissue have been refined, and dissociated primary culture of the spiral ganglion has become a widely accepted in vitro model for studying nerve damage and regeneration in the cochlea. Additionally, patterned substrates have been developed that facilitate and direct neural outgrowth. A number of automated and semi-automated methods for quantifying this neurite outgrowth have been utilized in recent years (Zhang et al., J Neurosci Methods 160(1):149-162, 2007; Tapias et al., Neurobiol Dis 54:158-168, 2013). Here, we describe a method to study the effect of topographical cues on spiral ganglion neurite and Schwann cell alignment. We discuss our microfabrication process, characterization of pattern features, cell culture techniques for both spiral ganglion neurons and spiral ganglion Schwann cells. In addition, we describe protocols for reducing fibroblast count, immunocytochemistry, and methods for quantifying neurite and Schwann cell alignment.
Separation and sorting of cells in microsystems using physical principles
NASA Astrophysics Data System (ADS)
Lee, Gi-Hun; Kim, Sung-Hwan; Ahn, Kihoon; Lee, Sang-Hoon; Park, Joong Yull
2016-01-01
In the last decade, microfabrication techniques have been combined with microfluidics and applied to cell biology. Utilizing such new techniques, various cell studies have been performed for the research of stem cells, immune cells, cancer, neurons, etc. Among the various biological applications of microtechnology-based platforms, cell separation technology has been highly regarded in biological and clinical fields for sorting different types of cells, finding circulating tumor cells (CTCs), and blood cell separation, amongst other things. Many cell separation methods have been created using various physical principles. Representatively, these include hydrodynamic, acoustic, dielectrophoretic, magnetic, optical, and filtering methods. In this review, each of these methods will be introduced, and their physical principles and sample applications described. Each physical principle has its own advantages and disadvantages. The engineers who design the systems and the biologists who use them should understand the pros and cons of each method or principle, to broaden the use of microsystems for cell separation. Continuous development of microsystems for cell separation will lead to new opportunities for diagnosing CTCs and cancer metastasis, as well as other elements in the bloodstream.
Polymer physics experiments with single DNA molecules
NASA Astrophysics Data System (ADS)
Smith, Douglas E.
1999-11-01
Bacteriophage DNA molecules were taken as a model flexible polymer chain for the experimental study of polymer dynamics at the single molecule level. Video fluorescence microscopy was used to directly observe the conformational dynamics of fluorescently labeled molecules, optical tweezers were used to manipulate individual molecules, and micro-fabricated flow cells were used to apply controlled hydrodynamic strain to molecules. These techniques constitute a powerful new experimental approach in the study of basic polymer physics questions. I have used these techniques to study the diffusion and relaxation of isolated and entangled polymer molecules and the hydrodynamic deformation of polymers in elongational and shear flows. These studies revealed a rich, and previously unobserved, ``molecular individualism'' in the dynamical behavior of single molecules. Individual measurements on ensembles of identical molecules allowed the average conformation to be determined as well as the underlying probability distributions for molecular conformation. Scaling laws, that predict the dependence of properties on chain length and concentration, were also tested. The basic assumptions of the reptation model were directly confirmed by visualizing the dynamics of entangled chains.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Huang, Cong-Min; Zhu, Ying; Jin, Di-Qiong
Ambient mass spectrometry (MS) has revolutionized the way of MS analysis and broadened its application in various fields. This paper describes the use of microfluidic techniques to simplify the setup and improve the functions of ambient MS by integrating the sampling probe, electrospray emitter probe, and online mixer on a single glass microchip. Two types of sampling probes, including a parallel-channel probe and a U-shaped channel probe, were designed for dryspot and liquid-phase droplet samples, respectively. We demonstrated that the microfabrication techniques not only enhanced the capability of ambient MS methods in analysis of dry-spot samples on various surfaces, butmore » also enabled new applications in the analysis of nanoliter-scale chemical reactions in an array of droplets. The versatility of the microchip-based ambient MS method was demonstrated in multiple different applications including evaluation of residual pesticide on fruit surfaces, sensitive analysis of low-ionizable analytes using postsampling derivatization, and high-throughput screening of Ugi-type multicomponent reactions.« less
Approximating gecko setae via direct laser lithography
NASA Astrophysics Data System (ADS)
Tricinci, Omar; Eason, Eric V.; Filippeschi, Carlo; Mondini, Alessio; Mazzolai, Barbara; Pugno, Nicola M.; Cutkosky, Mark R.; Greco, Francesco; Mattoli, Virgilio
2018-07-01
The biomimetic replication of dry adhesion present in the gecko’s foot has attracted great interest in recent years. All the microfabrication techniques used so far were not able to faithfully reproduce the hierarchical and complex three-dimensional geometry of the gecko’s setae, with features at the micro- and nano-scale, thus reducing the effectiveness that such conformal morphology could provide. By means of direct laser lithography we fabricated artificial hairs that faithfully reproduce the natural model. This technique allows the fabrication of three-dimensional microstructures with outstanding results in terms of reproducibility and resolution at the micro- and nano-scale. It was possible to get very close to the morphology of the natural gecko setae, especially concerning the hierarchical shape. We designed several morphologies for the setae and studied the effects in terms of adhesion and friction performances compared to the natural counterpart, showing the interplay between morphology, dimensional scaling and materials. Direct laser lithography promises great applications in the biomimetics field, paving the way to the implementation of the concept of hierarchical bioinspired dry adhesives.
Wang, P.; Roberts, R. C.; Ngan, A. H. W.
2016-01-01
An efficient technique for writing 2D oxide patterns on conductive substrates is proposed and demonstrated in this paper. The technique concerns a novel concept for selective electrodeposition, in which a minimum quantity of liquid electrolyte, through an extrusion nozzle, is delivered and manipulated into the desired shape on the substrate, meanwhile being electrodeposited into the product by an applied voltage across the nozzle and substrate. Patterns of primarily Cu2O with 80~90% molar fraction are successfully fabricated on stainless steel substrates using this method. A key factor that allows the solid product to be primarily oxide Cu2O instead of metal Cu – the product predicted by the equilibrium Pourbaix diagram given the unusually large absolute deposition voltage used in this method, is the non-equilibrium condition involved in the process due to the short deposition time. Other factors including the motion of the extrusion nozzle relative to the substrate and the surface profile of the substrate that influence the electrodeposition performance are also discussed. PMID:27255188
Takamatsu, A; Yamamoto, T; Fujii, T
2004-01-01
Microfabrication technique was used to construct a model system with a living cell of plasmodium of the true slime mold, Physarum polycephalum, a living coupled oscillator system. Its parameters can be systematically controlled as in computer simulations, so that results are directly comparable to those of general mathematical models. As the first step, we investigated responses in oscillatory cells, the oscillators of the plasmodium, to periodic stimuli by temperature changes to elucidate characteristics of the cells as nonlinear systems whose internal dynamics are unknown because of their complexity. We observed that the forced oscillator of the plasmodium show 1:1, 2:1, 3:1 frequency locking inside so-called Arnold tongues regions as well as in other nonlinear systems such as chemical systems and other biological systems. In addition, we found spontaneous switching behavior from certain frequency locking states to other states, even under certain fixed parameters. This technique can be applied to more complex systems with multiple elements, such as coupled oscillator systems, and would be useful to investigate complicated phenomena in biological systems such as information processing.
Silicon Carbide membranes as substrate for Synchrotron measurements
NASA Astrophysics Data System (ADS)
Altissimo, M.; Iacopi, A.; Hold, L.; Matruglio, A.; Zucchiatti, P.; Vaccari, L.; Bedolla, D. E.; Ulloa Severino, L.; Parisse, P.; Gianoncelli, A.
2018-05-01
Silicon Nitride (SiN) membranes have long been the substrate of choice for many different synchrotron techniques at very different wavelengths (from IR to hard X-rays), due to their ease of production, relative robustness even in films <200 nm in thickness, and compatibility with standard microfabrication techniques. Here we present a set of data referring to custom-made Silicon Carbide (SiC) windows. We measured SiC surface roughness, mechanical robustness and membrane transmission both at IR and soft X-rays wavelengths, and compared the data with standard Si3N4, acquired in the same conditions. Further, we grew HEK293T cells both on Si3N4 and SiC membranes, and analysed them with IR and soft X-ray microscopy. Our data demonstrates how SiC is an excellent choice as membrane material for synchrotron measurements, since it shows higher transmission and higher robustness as compared to Si3N4 of the same thickness, and an improved compatibility for cell culturing, allowing to postulate their use also for bio-oriented research.
Hydrogel microparticles for biosensing
Le Goff, Gaelle C.; Srinivas, Rathi L.; Hill, W. Adam; Doyle, Patrick S.
2015-01-01
Due to their hydrophilic, biocompatible, and highly tunable nature, hydrogel materials have attracted strong interest in the recent years for numerous biotechnological applications. In particular, their solution-like environment and non-fouling nature in complex biological samples render hydrogels as ideal substrates for biosensing applications. Hydrogel coatings, and later, gel dot surface microarrays, were successfully used in sensitive nucleic acid assays and immunoassays. More recently, new microfabrication techniques for synthesizing encoded particles from hydrogel materials have enabled the development of hydrogel-based suspension arrays. Lithography processes and droplet-based microfluidic techniques enable generation of libraries of particles with unique spectral or graphical codes, for multiplexed sensing in biological samples. In this review, we discuss the key questions arising when designing hydrogel particles dedicated to biosensing. How can the hydrogel material be engineered in order to tune its properties and immobilize bioprobes inside? What are the strategies to fabricate and encode gel particles, and how can particles be processed and decoded after the assay? Finally, we review the bioassays reported so far in the literature that have used hydrogel particle arrays and give an outlook of further developments of the field. PMID:26594056
Cost-effective rapid prototyping and assembly of poly(methyl methacrylate) microfluidic devices.
Matellan, Carlos; Del Río Hernández, Armando E
2018-05-03
The difficulty in translating conventional microfluidics from laboratory prototypes to commercial products has shifted research efforts towards thermoplastic materials for their higher translational potential and amenability to industrial manufacturing. Here, we present an accessible method to fabricate and assemble polymethyl methacrylate (PMMA) microfluidic devices in a "mask-less" and cost-effective manner that can be applied to manufacture a wide range of designs due to its versatility. Laser micromachining offers high flexibility in channel dimensions and morphology by controlling the laser properties, while our two-step surface treatment based on exposure to acetone vapour and low-temperature annealing enables improvement of the surface quality without deformation of the device. Finally, we demonstrate a capillarity-driven adhesive delivery bonding method that can produce an effective seal between PMMA devices and a variety of substrates, including glass, silicon and LiNbO 3 . We illustrate the potential of this technique with two microfluidic devices, an H-filter and a droplet generator. The technique proposed here offers a low entry barrier for the rapid prototyping of thermoplastic microfluidics, enabling iterative design for laboratories without access to conventional microfabrication equipment.
Multi-layer plastic/glass microfluidic systems containing electrical and mechanical functionality.
Han, Arum; Wang, Olivia; Graff, Mason; Mohanty, Swomitra K; Edwards, Thayne L; Han, Ki-Ho; Bruno Frazier, A
2003-08-01
This paper describes an approach for fabricating multi-layer microfluidic systems from a combination of glass and plastic materials. Methods and characterization results for the microfabrication technologies underlying the process flow are presented. The approach is used to fabricate and characterize multi-layer plastic/glass microfluidic systems containing electrical and mechanical functionality. Hot embossing, heat staking of plastics, injection molding, microstenciling of electrodes, and stereolithography were combined with conventional MEMS fabrication techniques to realize the multi-layer systems. The approach enabled the integration of multiple plastic/glass materials into a single monolithic system, provided a solution for the integration of electrical functionality throughout the system, provided a mechanism for the inclusion of microactuators such as micropumps/valves, and provided an interconnect technology for interfacing fluids and electrical components between the micro system and the macro world.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Jin, Congrui; Davoodabadi, Ali; Li, Jianlin
Because of the development of novel micro-fabrication techniques to produce ultra-thin materials and increasing interest in thin biological membranes, in recent years, the mechanical characterization of thin films has received a significant amount of attention. To provide a more accurate solution for the relationship among contact radius, load and deflection, the fundamental and widely applicable problem of spherical indentation of a freestanding circular membrane have been revisited. The work presented here significantly extends the previous contributions by providing an exact analytical solution to the governing equations of Föppl–Hecky membrane indented by a frictionless spherical indenter. In this study, experiments ofmore » spherical indentation has been performed, and the exact analytical solution presented in this article is compared against experimental data from existing literature as well as our own experimental results.« less
Direct Prototyping of Patterned Nanoporous Carbon: A Route from Materials to On-chip Devices
Shen, Caiwei; Wang, Xiaohong; Zhang, Wenfeng; Kang, Feiyu
2013-01-01
Prototyping of nanoporous carbon membranes with three-dimensional microscale patterns is significant for integration of such multifunctional materials into various miniaturized systems. Incorporating nano material synthesis into microelectronics technology, we present a novel approach to direct prototyping of carbon membranes with highly nanoporous structures inside. Membranes with significant thicknesses (1 ~ 40 μm) are rapidly prototyped at wafer level by combining nano templating method with readily available microfabrication techniques, which include photolithography, high-temperature annealing and etching. In particular, the high-surface-area membranes are specified as three-dimensional electrodes for micro supercapacitors and show high performance compared to reported ones. Improvements in scalability, compatibility and cost make the general strategy promising for batch fabrication of operational on-chip devices or full integration of three-dimensional nanoporous membranes with existing micro systems. PMID:23887486
Adipose and mammary epithelial tissue engineering.
Zhu, Wenting; Nelson, Celeste M
2013-01-01
Breast reconstruction is a type of surgery for women who have had a mastectomy, and involves using autologous tissue or prosthetic material to construct a natural-looking breast. Adipose tissue is the major contributor to the volume of the breast, whereas epithelial cells comprise the functional unit of the mammary gland. Adipose-derived stem cells (ASCs) can differentiate into both adipocytes and epithelial cells and can be acquired from autologous sources. ASCs are therefore an attractive candidate for clinical applications to repair or regenerate the breast. Here we review the current state of adipose tissue engineering methods, including the biomaterials used for adipose tissue engineering and the application of these techniques for mammary epithelial tissue engineering. Adipose tissue engineering combined with microfabrication approaches to engineer the epithelium represents a promising avenue to replicate the native structure of the breast.
Adipose and mammary epithelial tissue engineering
Zhu, Wenting; Nelson, Celeste M.
2013-01-01
Breast reconstruction is a type of surgery for women who have had a mastectomy, and involves using autologous tissue or prosthetic material to construct a natural-looking breast. Adipose tissue is the major contributor to the volume of the breast, whereas epithelial cells comprise the functional unit of the mammary gland. Adipose-derived stem cells (ASCs) can differentiate into both adipocytes and epithelial cells and can be acquired from autologous sources. ASCs are therefore an attractive candidate for clinical applications to repair or regenerate the breast. Here we review the current state of adipose tissue engineering methods, including the biomaterials used for adipose tissue engineering and the application of these techniques for mammary epithelial tissue engineering. Adipose tissue engineering combined with microfabrication approaches to engineer the epithelium represents a promising avenue to replicate the native structure of the breast. PMID:23628872
Jin, Congrui; Davoodabadi, Ali; Li, Jianlin; ...
2017-01-11
Because of the development of novel micro-fabrication techniques to produce ultra-thin materials and increasing interest in thin biological membranes, in recent years, the mechanical characterization of thin films has received a significant amount of attention. To provide a more accurate solution for the relationship among contact radius, load and deflection, the fundamental and widely applicable problem of spherical indentation of a freestanding circular membrane have been revisited. The work presented here significantly extends the previous contributions by providing an exact analytical solution to the governing equations of Föppl–Hecky membrane indented by a frictionless spherical indenter. In this study, experiments ofmore » spherical indentation has been performed, and the exact analytical solution presented in this article is compared against experimental data from existing literature as well as our own experimental results.« less
Feghhi, Shirin; Sniadecki, Nathan J.
2011-01-01
Coagulation involves a complex set of events that are important in maintaining hemostasis. Biochemical interactions are classically known to regulate the hemostatic process, but recent evidence has revealed that mechanical interactions between platelets and their surroundings can also play a substantial role. Investigations into platelet mechanobiology have been challenging however, due to the small dimensions of platelets and their glycoprotein receptors. Platelet researchers have recently turned to microfabricated devices to control these physical, nanometer-scale interactions with a higher degree of precision. These approaches have enabled exciting, new insights into the molecular and biomechanical factors that affect platelets in clot formation. In this review, we highlight the new tools used to understand platelet mechanobiology and the roles of adhesion, shear flow, and retraction forces in clot formation. PMID:22272117
Easy Fabrication of Thin Membranes with Through Holes. Application to Protein Patterning
Arasi, Bakya; Gauthier, Nils; Viasnoff, Virgile
2012-01-01
Since protein patterning on 2D surfaces has emerged as an important tool in cell biology, the development of easy patterning methods has gained importance in biology labs. In this paper we present a simple, rapid and reliable technique to fabricate thin layers of UV curable polymer with through holes. These membranes are as easy to fabricate as microcontact printing stamps and can be readily used for stencil patterning. We show how this microfabrication scheme allows highly reproducible and highly homogeneous protein patterning with micron sized resolution on surfaces as large as 10 cm2. Using these stencils, fragile proteins were patterned without loss of function in a fully hydrated state. We further demonstrate how intricate patterns of multiple proteins can be achieved by stacking the stencil membranes. We termed this approach microserigraphy. PMID:22952944
NASA Astrophysics Data System (ADS)
Burtsev, Vasilii; Marchuk, Valentina; Kugaevskiy, Artem; Guselnikova, Olga; Elashnikov, Roman; Miliutina, Elena; Postnikov, Pavel; Svorcik, Vaclav; Lyutakov, Oleksiy
2018-03-01
Nano-spheres lithography is actually considered as a powerful tool to manufacture various periodic structures with a wide potential in the field of nano- and micro-fabrication. However, during self-assembling of colloid microspheres, various defects and mismatches can appear. In this work the size and quality of single-domains of closed-packed polystyrene (PS), grown up on thin Au layers modified by hydrophilic or hydrophobic functional groups via diazonium chemistry was studied. The effects of the surface modification on the quality and single-domain size of polystyrene (PS) microspheres array were investigated and discussed. Modified surfaces were characterized using the AFM and wettability tests. PS colloidal suspension was deposited using the drop evaporation method. Resulted PS microspheres array was characterized using the SEM, AFM and confocal microscopy technique.
Single-laser, one beam, tetrahedral magneto-optical trap.
Vangeleyn, Matthieu; Griffin, Paul F; Riis, Erling; Arnold, Aidan S
2009-08-03
We have realized a 4-beam pyramidal magneto-optical trap ideally suited for future microfabrication. Three mirrors split and steer a single incoming beam into a tripod of reflected beams, allowing trapping in the four-beam overlap volume. We discuss the influence of mirror angle on cooling and trapping, finding optimum efficiency in a tetrahedral configuration. We demonstrate the technique using an ex-vacuo mirror system to illustrate the previously inaccessible supra-plane pyramid MOT configuration. Unlike standard pyramidal MOTs both the pyramid apex and its mirror angle are non-critical and our MOT offers improved molasses free from atomic shadows in the laser beams. The MOT scheme naturally extends to a 2-beam refractive version with high optical access. For quantum gas experiments, the mirror system could also be used for a stable 3D tetrahedral optical lattice.
Rapid and low-cost hot-embossing of polycaprolactone microfluidic devices
NASA Astrophysics Data System (ADS)
Fan, Yiqiang; Liu, Shicheng; He, Jianyun; Gao, Kexin; Zhang, Yajun
2018-01-01
Polycaprolactone (PCL) is a low-cost biocompatible and biodegradable material which is highly suitable for the short-live applications like microfluidics in the biological and medical field. In this study, a rapid and low-cost microfabrication technique for PCL-based microfluidic devices is proposed, the SU-8 mold fabricated on the silicon substrate was used for the hot-embossing of microstructures on PCL. Since PCL after the molding process is optically non-transparent, to improve the visibility of the fluid in the microfluidic device and enclosing the microchannel, a transparency adhesive film which originally used for the sealing of PCR well-plate is used for the sealing of the microchannels embossed on PCL substrate. The profile of the fabricated microchannels was carefully characterized, the bonding strength is tested and several PCL-based microfluidic devices were also fabricated and tested for demonstration.
Enhanced sensitivity of a microfabricated resonator using a graphene-polystyrene bilayer membrane
DOE Office of Scientific and Technical Information (OSTI.GOV)
Yun, Minhyuk; Lee, Eunho; Cho, Kilwon
2014-08-18
A graphene layer was synthesized using chemical vapor deposition methods and a polystyrene solution was spin-cast onto the graphene film. The graphene-polystyrene bilayer membrane was attached between the two tines of a microfabricated quartz tuning fork (QTF). The modulus of the graphene-polystyrene bilayer was measured to be twice that of a pristine polystyrene membrane. Exposure of the membrane-coated QTF to ethanol vapor decreased the resonance frequency of the microresonator. The bilayer membrane-coated QTF produced a frequency change that was three times the change obtained using a polystyrene membrane-coated QTF, with a lower degree of degradation in the Q factor. Themore » limit of detection of the bilayer membrane-coated QTF to ethanol vapor was determined to be 20 ppm.« less
Rapid Characterization of Magnetic Moment of Cells for Magnetic Separation
Ooi, Chinchun; Earhart, Christopher M.; Wilson, Robert J.; Wang, Shan X.
2014-01-01
NCI-H1650 lung cancer cell lines labeled with magnetic nanoparticles via the Epithelial Cell Adhesion Molecule (EpCAM) antigen were previously shown to be captured at high efficiencies by a microfabricated magnetic sifter. If fine control and optimization of the magnetic separation process is to be achieved, it is vital to be able to characterize the labeled cells’ magnetic moment rapidly. We have thus adapted a rapid prototyping method to obtain the saturation magnetic moment of these cells. This method utilizes a cross-correlation algorithm to analyze the cells’ motion in a simple fluidic channel to obtain their magnetophoretic velocity, and is effective even when the magnetic moments of cells are small. This rapid characterization is proven useful in optimizing our microfabricated magnetic sifter procedures for magnetic cell capture. PMID:24771946
A High-Average-Power Free Electron Laser for Microfabrication and Surface Applications
NASA Technical Reports Server (NTRS)
Dylla, H. F.; Benson, S.; Bisognano, J.; Bohn, C. L.; Cardman, L.; Engwall, D.; Fugitt, J.; Jordan, K.; Kehne, D.; Li, Z.;
1995-01-01
CEBAF has developed a comprehensive conceptual design of an industrial user facility based on a kilowatt ultraviolet (UV) (160-1000 mm) and infrared (IR) (2-25 micron) free electron laser (FEL) driven by a recirculating, energy recovering 200 MeV superconducting radio frequency (SRF) accelerator. FEL users, CEBAF's partners in the Lase Processing Consortium, including AT&T, DuPont, IBM, Northrop Grumman, 3M, and Xerox, are developing applications such as metal, ceramic, and electronic material micro-fabrication and polymer and metal surface processing, with the overall effort leading to later scale-up to industrial systems at 50-100 kW. Representative applications are described. The proposed high-average-power FEL overcomes limitations of conventional laser sources in available power, cost-effectiveness, tunability, and pulse structure.
Microfabricated polymer injector for direct mass spectrometry coupling.
Gobry, Véronique; van Oostrum, Jan; Martinelli, Marco; Rohner, Tatiana C; Reymond, Frédéric; Rossier, Joël S; Girault, Hubert H
2002-04-01
This paper demonstrates the coupling of a plasma etched polymer microfluidic system with an electrospray mass spectrometer by generation of a nanospray. Taking advantage of the microtechnology processes and polymer properties, high volume production with good reproducibility of hydrophobic interfaces could be obtained. The nanospray was directly produced from the outlet of the plastic microfabricated chip positioned in front of the capillary entrance of the mass spectrometer. No chemical background due to the polymer has been observed under standard nanospray conditions. The performances of the spray as well as its efficiency have been demonstrated by flow measurements, stability establishment and tandem mass spectrometry experiment on angiotensin II. The spray was actuated without additional flow in methanol: water:acetic acid (50:49:1%) solution. A 40 fmol/microL detection limit could be reached.
Highly uniform parallel microfabrication using a large numerical aperture system
DOE Office of Scientific and Technical Information (OSTI.GOV)
Zhang, Zi-Yu; Su, Ya-Hui, E-mail: ustcsyh@ahu.edu.cn, E-mail: dongwu@ustc.edu.cn; Zhang, Chen-Chu
In this letter, we report an improved algorithm to produce accurate phase patterns for generating highly uniform diffraction-limited multifocal arrays in a large numerical aperture objective system. It is shown that based on the original diffraction integral, the uniformity of the diffraction-limited focal arrays can be improved from ∼75% to >97%, owing to the critical consideration of the aperture function and apodization effect associated with a large numerical aperture objective. The experimental results, e.g., 3 × 3 arrays of square and triangle, seven microlens arrays with high uniformity, further verify the advantage of the improved algorithm. This algorithm enables the laser parallelmore » processing technology to realize uniform microstructures and functional devices in the microfabrication system with a large numerical aperture objective.« less
Low power integrated pumping and valving arrays for microfluidic systems
Krulevitch, Peter A [Pleasanton, CA; Benett, William J [Livermore, CA; Rose, Klint A [Livermore, CA; Hamilton, Julie [Tracy, CA; Maghribi, Mariam [Davis, CA
2006-04-11
Low power integrated pumping and valving arrays which provide a revolutionary approach for performing pumping and valving approach for performing pumping and valving operations in microfabricated fluidic systems for applications such as medical diagnostic microchips. Traditional methods rely on external, large pressure sources that defeat the advantages of miniaturization. Previously demonstrated microfabrication devices are power and voltage intensive, only function at sufficient pressure to be broadly applicable. This approach integrates a lower power, high-pressure source with a polymer, ceramic, or metal plug enclosed within a microchannel, analogous to a microsyringe. When the pressure source is activated, the polymer plug slides within the microchannel, pumping the fluid on the opposite side of the plug without allowing fluid to leak around the plug. The plugs also can serve as microvalves.
Overview 2004 of NASA-Stirling Convertor CFD Model Development and Regenerator R and D Efforts
NASA Technical Reports Server (NTRS)
Tew, Roy C.; Dyson, Rodger W.; Wilson, Scott D.; Demko, Rikako
2004-01-01
This paper reports on accomplishments in 2004 in (1) development of Stirling-convertor CFD models at NASA Glenn and via a NASA grant, (2) a Stirling regenerator-research effort being conducted via a NASA grant (a follow-on effort to an earlier DOE contract), and (3) a regenerator-microfabrication contract for development of a "next-generation Stirling regenerator." Cleveland State University is the lead organization for all three grant/contractual efforts, with the University of Minnesota and Gedeon Associates as subcontractors. Also, the Stirling Technology Company and Sunpower, Inc. are both involved in all three efforts, either as funded or unfunded participants. International Mezzo Technologies of Baton Rouge, Louisiana is the regenerator fabricator for the regenerator-microfabrication contract. Results of the efforts in these three areas are summarized.
Microfabricated therapeutic actuators
Lee, Abraham P.; Northrup, M. Allen; Ciarlo, Dino R.; Krulevitch, Peter A.; Benett, William J.
1999-01-01
Microfabricated therapeutic actuators are fabricated using a shape memory polymer (SMP), a polyurethane-based material that undergoes a phase transformation at a specified temperature (Tg). At a temperature above temperature Tg material is soft and can be easily reshaped into another configuration. As the temperature is lowered below temperature Tg the new shape is fixed and locked in as long as the material stays below temperature Tg. Upon reheating the material to a temperature above Tg, the material will return to its original shape. By the use of such SMP material, SMP microtubing can be used as a release actuator for the delivery of embolic coils through catheters into aneurysms, for example. The microtubing can be manufactured in various sizes and the phase change temperature Tg is determinate for an intended temperature target and intended use.
Microfabricated therapeutic actuators
Lee, A.P.; Northrup, M.A.; Ciarlo, D.R.; Krulevitch, P.A.; Benett, W.J.
1999-06-15
Microfabricated therapeutic actuators are fabricated using a shape memory polymer (SMP), a polyurethane-based material that undergoes a phase transformation at a specified temperature (Tg). At a temperature above temperature Tg material is soft and can be easily reshaped into another configuration. As the temperature is lowered below temperature Tg the new shape is fixed and locked in as long as the material stays below temperature Tg. Upon reheating the material to a temperature above Tg, the material will return to its original shape. By the use of such SMP material, SMP microtubing can be used as a release actuator for the delivery of embolic coils through catheters into aneurysms, for example. The microtubing can be manufactured in various sizes and the phase change temperature Tg is determinate for an intended temperature target and intended use. 8 figs.
Chemical Gas Sensors for Aeronautic and Space Applications 2
NASA Technical Reports Server (NTRS)
Hunter, Gary W.; Chen, Liong-Yu; Neudeck, Phil G.; Knight, Dale; Liu, C. C.; Wu, Q. H.; Zhou, H. J.; Makel, Darby; Liu, M.; Rauch, W. A.
1998-01-01
Aeronautic and space applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. Areas of interest include launch vehicle safety monitoring, emission monitoring, and fire detection. This paper discusses the needs of aeronautic and space applications and the point-contact sensor technology being developed to address these needs. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Sensor development for each application involves its own challenges in the fields of materials science and fabrication technology. The number of dual-use commercial applications of this microfabricated gas sensor technology make this area of sensor development a field of significant interest.
Chemical Gas Sensors for Aeronautics and Space Applications III
NASA Technical Reports Server (NTRS)
Hunter, G. W.; Neudeck, P. G.; Chen, L. Y.; Liu, C. C.; Wu, Q. H.; Sawayda, M. S.; Jin, Z.; Hammond, J.; Makel, D.; Liu, M.;
1999-01-01
Aeronautic and space applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. Areas of interest include launch vehicle safety monitoring, emission monitoring, and fire detection. This paper discusses the needs of aeronautic and space applications and the point-contact sensor technology being developed to address these needs. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Sensor development for each application involves its own challenges in the fields of materials science and fabrication technology. The number of dual-use commercial applications of this microfabricated gas sensor technology make this area of sensor development a field of significant interest.
Chemical Gas Sensors for Aeronautic and Space Applications 2
NASA Technical Reports Server (NTRS)
Hunter, G. W.; Chen, L. Y.; Neudeck, P. G.; Knight, D.; Liu, C. C.; Wu, Q. H.; Zhou, H. J.; Makel, D.; Liu, M.; Rauch, W. A.
1998-01-01
Aeronautic and Space applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. Areas of most interest include launch vehicle safety monitoring emission monitoring and fire detection. This paper discusses the needs of aeronautic and space applications and the point-contact sensor technology being developed to address these needs. The development of these sensor is based on progress two types of technology: 1) Micro-machining and micro-fabrication technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Sensor development for each application involves its own challenges in the fields of materials science and fabrication technology. The number of dual-use commercial applications of this micro-fabricated gas sensor technology make this area of sensor development a field of significant interest.
Microfabricated Atomic Clocks at NIST
2004-12-01
J. A. Kusters and C. A. Adams, 1999, “Performance requirements of communication base station time standards,” RF Design, 22, pp. 28-38. R. Lutwak ...QUESTIONS AND ANSWERS ROBERT LUTWAK (Symmetricom
NASA Astrophysics Data System (ADS)
Shaik, F. Azam; Cathcart, G.; Ihida, S.; Lereau-Bernier, M.; Leclerc, E.; Sakai, Y.; Toshiyoshi, H.; Tixier-Mita, A.
2017-05-01
In lab-on-a-chip (LoC) devices, microfluidic displacement of liquids is a key component. electrowetting on dielectric (EWOD) is a technique to move fluids, with the advantage of not requiring channels, pumps or valves. Fluids are discretized into droplets on microelectrodes and moved by applying an electric field via the electrodes to manipulate the contact angle. Micro-objects, such as biological cells, can be transported inside of these droplets. However, the design of conventional microelectrodes, made by standard micro-fabrication techniques, fixes the path of the droplets, and limits the reconfigurability of paths and thus limits the parallel processing of droplets. In that respect, thin film transistor (TFT) technology presents a great opportunity as it allows infinitely reconfigurable paths, with high parallelizability. We propose here to investigate the possibility of using TFT array devices for high throughput cell manipulation using EWOD. A COMSOL based 2D simulation coupled with a MATLAB algorithm was used to simulate the contact angle modulation, displacement and mixing of droplets. These simulations were confirmed by experimental results. The EWOD technique was applied to a droplet of culture medium containing HepG2 carcinoma cells and demonstrated no negative effects on the viability of the cells. This confirms the possibility of applying EWOD techniques to cellular applications, such as parallel cell analysis.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Jensen, David S.; Kanyal, Supriya S.; Gupta, Vipul
2012-09-28
In a recent report (Song, J.; et al., Advanced Functional Materials 2011, 21, 1132-1139) some of us described the fabrication of thin layer chromatography (TLC) plates from patterned carbon nanotube (CNT) forests, which were directly infiltrated/coated with silicon by low pressure chemical vapor deposition (LPCVD) of silicon using SiH4. Following infiltration, the nanotubes were removed from the assemblies and the silicon simultaneously converted to SiO2 in a high temperature oxidation step. However, while straightforward, this process had some shortcomings, not the least of which was some distortion of the lithographically patterned features during the volume expansion that accompanied oxidation. Hereinmore » we overcome theis issue and also take substantial steps forward in the microfabrication of TLC plates by showing: (i) A new method for creating an adhesion promotion layer on CNT forests by depositing a few nanometers of carbon followed by atomic layer deposition (ALD) of Al2O3. This method for appears to be new, and X-ray photoelectron spectroscopy confirms the expected presence of oxygen after carbon deposition. ALD of Al2O3 alone and in combination with the carbon on patterned CNT forests was also explored as an adhesion promotion layer for CNT forest infiltration. (ii) Rapid, conformal deposition of an inorganic material that does not require subsequent oxidation: fast pseudo-ALD growth of SiO2 via alumina catalyzed deposition of tris(tert-butoxy)silanol onto the carbon/Al2O3-primed CNT forests. (iii) Faithful reproduction of the features in the masks used to microfabricate the TLC plates (M-TLC) this advance springs from the previous two points. (iv) A bonded (amino) phase on a CNT-templated microfabricated TLC plate. (v) Fast, highly efficient (125,000 - 225,000 N/m) separations of fluorescent dyes on M-TLC plates. (vi) Extensive characterization of our new materials by TEM, SEM, EDAX, DRIFT, and XPS. (vii) A substantially lower process temperature for the removal of the CNT scaffold as a result of the (already oxidized) materials used in this study.« less
A low feed-through 3D vacuum packaging technique with silicon vias for RF MEMS resonators
NASA Astrophysics Data System (ADS)
Zhao, Jicong; Yuan, Quan; Kan, Xiao; Yang, Jinling; Yang, Fuhua
2017-01-01
This paper presents a wafer-level three-dimensional (3D) vacuum packaging technique for radio frequency microelectromechanical systems (RF MEMS) resonators. A Sn-rich Au-Sn solder bonding is employed to provide a vacuum encapsulation as well as electrical conductions. Vertical silicon vias are micro-fabricated by glass reflow process. The optimized grounding, via pitch, and all-round shielding effectively reduce feed-through capacitance. Thus the signal-to-background ratios (SBRs) of the transmission signals increase from 17 dB to 20 dB, and the quality factor (Q) values of the packaged resonators go from around 8000 up to more than 9500. The measured average leak rate and shear strength are (2.55 ± 0.9) × 10-8 atm-cc s-1 and 42.53 ± 4.19 MPa, respectively. Furthermore, thermal cycling test between -40 °C and 100 °C and high temperature storage test at 150 °C show that the resonant-frequency drifts are less than ±7 ppm. In addition, the SBRs and the Q values have no obvious change after the tests. The experimental results demonstrated that the proposed encapsulation technique is well suited for the applications of RF MEMS devices.
Curvature Control of Silicon Microlens for THz Dielectric Antenna
NASA Technical Reports Server (NTRS)
Lee, Choonsup; Chattopadhyay, Goutam; Cooper, Ken; Mehdi, Imran
2012-01-01
We have controlled the curvature of silicon microlens by changing the amount of photoresist in order to microfabricate hemispherical silicon microlens which can improve the directivity and reduce substrate mode losses.
A low-cost fabrication method for sub-millimeter wave GaAs Schottky diode
NASA Astrophysics Data System (ADS)
Jenabi, Sarvenaz; Deslandes, Dominic; Boone, Francois; Charlebois, Serge A.
2017-10-01
In this paper, a submillimeter-wave Schottky diode is designed and simulated. Effect of Schottky layer thickness on cut-off frequency is studied. A novel microfabrication process is proposed and implemented. The presented microfabrication process avoids electron-beam (e-beam) lithography which reduces the cost. Also, this process provides more flexibility in selection of design parameters and allows significant reduction in the device parasitic capacitance. A key feature of the process is that the Schottky contact, the air-bridges, and the transmission lines, are fabricated in a single lift-off step. This process relies on a planarization method that is suitable for trenches of 1-10 μm deep and is tolerant to end-point variations. The fabricated diode is measured and results are compared with simulations. A very good agreement between simulation and measurement results are observed.
NASA Astrophysics Data System (ADS)
Akiyama, Terunobu; Staufer, Urs; Rooij, Nico F. de
2002-06-01
A microfabricated, electrical connector is proposed for facilitating the mounting of atomic force microscopy (AFM) probes, which have an integrated sensor and/or actuator. Only a base chip, which acts as a socket, is permanently fixed onto a printed circuit board and electronically connected by standard wire bonding. The AFM chip, the “plug”, is flipped onto the base chip and pressed from the backside by a spring. Electrical contact with the eventual stress sensors, capacitive or piezoelectric sensor/actuators, is provided by contact bumps. These bumps of about 8 μm height are placed onto the base chip. They touch the pads on the AFM chip that were originally foreseen to be for wire bonding and thus provide the electrical contact. This connector schema was successfully used to register AFM images with piezoresistive cantilevers.
Lin, Chih-Tin; Meyhofer, Edgar; Kurabayashi, Katsuo
2010-01-01
Directional control of microtubule shuttles via microfabricated tracks is key to the development of controlled nanoscale mass transport by kinesin motor molecules. Here we develop and test a model to quantitatively predict the stochastic behavior of microtubule guiding when they mechanically collide with the sidewalls of lithographically patterned tracks. By taking into account appropriate probability distributions of microscopic states of the microtubule system, the model allows us to theoretically analyze the roles of collision conditions and kinesin surface densities in determining how the motion of microtubule shuttles is controlled. In addition, we experimentally observe the statistics of microtubule collision events and compare our theoretical prediction with experimental data to validate our model. The model will direct the design of future hybrid nanotechnology devices that integrate nanoscale transport systems powered by kinesin-driven molecular shuttles.
Microfabricated ion frequency standard
Schwindt, Peter; Biedermann, Grant; Blain, Matthew G.; Stick, Daniel L.; Serkland, Darwin K.; Olsson, III, Roy H.
2010-12-28
A microfabricated ion frequency standard (i.e. an ion clock) is disclosed with a permanently-sealed vacuum package containing a source of ytterbium (Yb) ions and an octupole ion trap. The source of Yb ions is a micro-hotplate which generates Yb atoms which are then ionized by a ultraviolet light-emitting diode or a field-emission electron source. The octupole ion trap, which confines the Yb ions, is formed from suspended electrodes on a number of stacked-up substrates. A microwave source excites a ground-state transition frequency of the Yb ions, with a frequency-doubled vertical-external-cavity laser (VECSEL) then exciting the Yb ions up to an excited state to produce fluorescent light which is used to tune the microwave source to the ground-state transition frequency, with the microwave source providing a precise frequency output for the ion clock.
Microfabricated instrument for tissue biopsy and analysis
Krulevitch, Peter A.; Lee, Abraham P.; Northrup, M. Allen; Benett, William J.
2001-01-01
A microfabricated biopsy/histology instrument which has several advantages over the conventional procedures, including minimal specimen handling, smooth cutting edges with atomic sharpness capable of slicing very thin specimens (approximately 2 .mu.m or greater), micro-liter volumes of chemicals for treating the specimens, low cost, disposable, fabrication process which renders sterile parts, and ease of use. The cutter is a "cheese-grater" style design comprising a block or substrate of silicon and which uses anisotropic etching of the silicon to form extremely sharp and precise cutting edges. As a specimen is cut, it passes through the silicon cutter and lies flat on a piece of glass which is bonded to the cutter. Microchannels are etched into the glass or silicon substrates for delivering small volumes of chemicals for treating the specimen. After treatment, the specimens can be examined through the glass substrate.
NASA Technical Reports Server (NTRS)
Ibrahim, Mounir; Danila, Daniel; Simon, Terrence; Mantell, Susan; Sun, Liyong; Gadeon, David; Qiu, Songgang; Wood, Gary; Kelly, Kevin; McLean, Jeffrey
2007-01-01
An actual-size microfabricated regenerator comprised of a stack of 42 disks, 19 mm diameter and 0.25 mm thick, with layers of microscopic, segmented, involute-shaped flow channels was fabricated and tested. The geometry resembles layers of uniformly-spaced segmented-parallel-plates, except the plates are curved. Each disk was made from electro-plated nickel using the LiGA process. This regenerator had feature sizes close to those required for an actual Stirling engine but the overall regenerator dimensions were sized for the NASA/Sunpower oscillating-flow regenerator test rig. Testing in the oscillating-flow test rig showed the regenerator performed extremely well, significantly better than currently used random-fiber material, producing the highest figures of merit ever recorded for any regenerator tested in that rig over its approximately 20 years of use.
A foldable electrode array for 3D recording of deep-seated abnormal brain cavities
NASA Astrophysics Data System (ADS)
Kil, Dries; De Vloo, Philippe; Fierens, Guy; Ceyssens, Frederik; Hunyadi, Borbála; Bertrand, Alexander; Nuttin, Bart; Puers, Robert
2018-06-01
Objective. This study describes the design and microfabrication of a foldable thin-film neural implant and investigates its suitability for electrical recording of deep-lying brain cavity walls. Approach. A new type of foldable neural electrode array is presented, which can be inserted through a cannula. The microfabricated electrode is specifically designed for electrical recording of the cavity wall of thalamic lesions resulting from stroke. The proof-of-concept is demonstrated by measurements in rat brain cavities. On implantation, the electrode array unfolds in the brain cavity, contacting the cavity walls and allowing recording at multiple anatomical locations. A three-layer microfabrication process based on UV-lithography and Reactive Ion Etching is described. Electrochemical characterization of the electrode is performed in addition to an in vivo experiment in which the implantation procedure and the unfolding of the electrode are tested and visualized. Main results. Electrochemical characterization validated the suitability of the electrode for in vivo use. CT imaging confirmed the unfolding of the electrode in the brain cavity and analysis of recorded local field potentials showed the ability to record neural signals of biological origin. Significance. The conducted research confirms that it is possible to record neural activity from the inside wall of brain cavities at various anatomical locations after a single implantation procedure. This opens up possibilities towards research of abnormal brain cavities and the clinical conditions associated with them, such as central post-stroke pain.
Hamilton, D W; Wong, K S; Brunette, D M
2006-05-01
The fabrication of surfaces that stimulate increased adhesion, migration, and differentiated function of osteoblasts has been viewed as being desirable for many orthopedic applications. Previous studies have shown that microfabricated pits and grooves alter adhesion, spreading, matrix secretion, and production of mineral by rat calvarial osteoblasts (RCOs). The mechanisms underlying these effects are unknown, although microenvironment and cell alignment are considered to play a role. The aim of this work was to investigate the behavior of RCOs on microfabricated discontinuous-edge surfaces (DESs), which could provide an alternative means to control both the microenvironment and cellular alignment. Two types of discontinuous-type structures were employed, gap-cornered boxes and micron scale pillars. DES gap-cornered boxes and the pillars influenced the arrangement of F-actin, microtubules, and vinculin. Osteoblasts were guided in their direction of migration on both types of substrata. Both box DESs and pillars altered the staining intensity and localization pattern of phosphotyrosine and src-activated FAK localization. Cell multilayering, matrix deposition, and mineralization were enhanced on both discontinuous topographies when compared with smooth controls. This study shows that DESs alter adhesion, migration, and proliferative responses from osteoblasts at early time points (<1 week) and promote multilayering, matrix deposition, and mineral deposition at later times (2-6 weeks). Such topographical patterns could potentially be employed as effective surface features on bone-contacting implants or in membrane-based periodontal applications.
Liu, Shaorong; Elkin, Christopher; Kapur, Hitesh
2003-11-01
We describe a microfabricated hybrid device that consists of a microfabricated chip containing multiple twin-T injectors attached to an array of capillaries that serve as the separation channels. A new fabrication process was employed to create two differently sized round channels in a chip. Twin-T injectors were formed by the smaller round channels that match the bore of the separation capillaries and separation capillaries were incorporated to the injectors through the larger round channels that match the outer diameter of the capillaries. This allows for a minimum dead volume and provides a robust chip/capillary interface. This hybrid design takes full advantage, such as sample stacking and purification and uniform signal intensity profile, of the unique chip injection scheme for DNA sequencing while employing long straight capillaries for the separations. In essence, the separation channel length is optimized for both speed and resolution since it is unconstrained by chip size. To demonstrate the reliability and practicality of this hybrid device, we sequenced over 1000 real-world samples from Human Chromosome 5 and Ciona intestinalis, prepared at Joint Genome Institute. We achieved average Phred20 read of 675 bases in about 70 min with a success rate of 91%. For the similar type of samples on MegaBACE 1000, the average Phred20 read is about 550-600 bases in 120 min separation time with a success rate of about 80-90%.
NASA Astrophysics Data System (ADS)
Pang, Guofeng
The objective of this work has been to design and develop a micromolding technique useful for batch fabrication to microfabricate 3D ceramic structures for device purposes using a sol gel composite processing technique and deep photolithography (UV LIGA). These structures may be the elements of ultrasound transducers, the structures associated with electronic packaging, or microstructures for microfluidic applications. To demonstrate the technique, the project has focused on the design and fabrication of annular and linear arrays for high frequency (>20 MHz) ultrasound imaging applications, particularly where an electronically steered imaging modality is employed. Other typical micromolded structures have been demonstrated to show the potential for micromolding. The transferability of the technique for industrial purposes is proposed. Using a sol gel composite process, the critical components in this technique are mold making, mold filling, material-processing, demolding, top electrode and essential material characterization. Two types of molds have been created using UV LIGA and/or electroplating. A purely organic mold made of Su-8 epoxy based photo-resist has shown tremendous performance for micromolding. The transducer packaging process has also been designed and evaluated at the laboratory level. A Su-8 micro bridge and bond pad has been used for wire bonding purposes. A 5-element annular array transducer has been fabricated by this technique and fully packaged. The micromolded piezoceramic structures have been characterized. The pulse echo performance of each element and the focusing performance of 5 elements of a packaged transducer array have been evaluated using a coaxial cable and a cable delay system.
Lin, Wen-Chi; Brondum, Klaus; Monroe, Charles W.; Burns, Mark A.
2017-01-01
Monitoring of the pH, oxidation-reduction-potential (ORP), and conductivity of aqueous samples is typically performed using multiple sensors. To minimize the size and cost of these sensors for practical applications, we have investigated the use of a single sensor constructed with only bare platinum electrodes deposited on a glass substrate. The sensor can measure pH from 4 to 10 while simultaneously measuring ORP from 150 to 800 mV. The device can also measure conductivity up to 8000 μS/cm in the range of 10 °C to 50 °C, and all these measurements can be made even if the water samples contain common ions found in residential water. The sensor is inexpensive (i.e., ~$0.10/unit) and has a sensing area below 1 mm2, suggesting that the unit is cost-efficient, robust, and widely applicable, including in microfluidic systems. PMID:28753913
Self-assembled single-crystal silicon circuits on plastic
Stauth, Sean A.; Parviz, Babak A.
2006-01-01
We demonstrate the use of self-assembly for the integration of freestanding micrometer-scale components, including single-crystal, silicon field-effect transistors (FETs) and diffusion resistors, onto flexible plastic substrates. Preferential self-assembly of multiple microcomponent types onto a common platform is achieved through complementary shape recognition and aided by capillary, fluidic, and gravitational forces. We outline a microfabrication process that yields single-crystal, silicon FETs in a freestanding, powder-like collection for use with self-assembly. Demonstrations of self-assembled FETs on plastic include logic inverters and measured electron mobility of 592 cm2/V-s. Finally, we extend the self-assembly process to substrates each containing 10,000 binding sites and realize 97% self-assembly yield within 25 min for 100-μm-sized elements. High-yield self-assembly of micrometer-scale functional devices as outlined here provides a powerful approach for production of macroelectronic systems. PMID:16968780
Design of an 8-40 GHz Antenna for the Wideband Instrument for Snow Measurements (WISM)
NASA Technical Reports Server (NTRS)
Durham, Timothy E.; Vanhille, Kenneth J.; Trent, Christopher; Lambert, Kevin M.; Miranda, Felix A.
2015-01-01
Measurement of land surface snow remains a significant challenge in the remote sensing arena. Developing the tools needed to remotely measure Snow Water Equivalent (SWE) is an important priority. The Wideband Instrument for Snow Measurements (WISM) is being developed to address this need. WISM is an airborne instrument comprised of a dual-frequency (X- and Ku-bands) Synthetic Aperture Radar (SAR) and dual-frequency (K- and Ka-bands) radiometer. A unique feature of this instrument is that all measurement bands share a common antenna aperture consisting of an array feed reflector that covers the entire bandwidth. This paper covers the design and fabrication of the wideband array feed which is based on tightly coupled dipole arrays. Implementation using a relatively new multi-layer microfabrication process results in a small, 6x6 element, dual-linear polarized array with beamformer that operates from 8 to 40 gigahertz.
Guided and magnetic self-assembly of tunable magnetoceptive gels
NASA Astrophysics Data System (ADS)
Tasoglu, S.; Yu, C. H.; Gungordu, H. I.; Guven, S.; Vural, T.; Demirci, U.
2014-09-01
Self-assembly of components into complex functional patterns at microscale is common in nature, and used increasingly in numerous disciplines such as optoelectronics, microfabrication, sensors, tissue engineering and computation. Here, we describe the use of stable radicals to guide the self-assembly of magnetically tunable gels, which we call ‘magnetoceptive’ materials at the scale of hundreds of microns to a millimeter, each can be programmed by shape and composition, into heterogeneous complex structures. Using paramagnetism of free radicals as a driving mechanism, complex heterogeneous structures are built in the magnetic field generated by permanent magnets. The overall magnetic signature of final structure is erased via an antioxidant vitamin E, subsequent to guided self-assembly. We demonstrate unique capabilities of radicals and antioxidants in fabrication of soft systems with heterogeneity in material properties, such as porosity, elastic modulus and mass density; then in bottom-up tissue engineering and finally, levitational and selective assembly of microcomponents.
Broadband electron spin resonance from 500 MHz to 40 GHz using superconducting coplanar waveguides
NASA Astrophysics Data System (ADS)
Clauss, Conrad; Bothner, Daniel; Koelle, Dieter; Kleiner, Reinhold; Bogani, Lapo; Scheffler, Marc; Dressel, Martin
2013-04-01
We present non-conventional electron spin resonance (ESR) experiments based on microfabricated superconducting Nb thin film waveguides. A very broad frequency range, from 0.5 to 40 GHz, becomes accessible at low temperatures down to 1.6 K and in magnetic fields up to 1.4 T. This allows for an accurate inspection of the ESR absorption position in the frequency domain, in contrast to the more common observation as a function of magnetic field. We demonstrate the applicability of frequency-swept ESR on Cr3+ atoms in ruby as well as on organic radicals of the nitronyl-nitroxide family. Measurements between 1.6 and 30 K reveal a small frequency shift of the ESR and a resonance broadening below the critical temperature of Nb, which we both attribute to a modification of the magnetic field configuration due to the appearance of shielding supercurrents in the waveguide.
Inductively guided circuits for ultracold dressed atoms
Sinuco-León, German A.; Burrows, Kathryn A.; Arnold, Aidan S.; Garraway, Barry M.
2014-01-01
Recent progress in optics, atomic physics and material science has paved the way to study quantum effects in ultracold atomic alkali gases confined to non-trivial geometries. Multiply connected traps for cold atoms can be prepared by combining inhomogeneous distributions of DC and radio-frequency electromagnetic fields with optical fields that require complex systems for frequency control and stabilization. Here we propose a flexible and robust scheme that creates closed quasi-one-dimensional guides for ultracold atoms through the ‘dressing’ of hyperfine sublevels of the atomic ground state, where the dressing field is spatially modulated by inductive effects over a micro-engineered conducting loop. Remarkably, for commonly used atomic species (for example, 7Li and 87Rb), the guide operation relies entirely on controlling static and low-frequency fields in the regimes of radio-frequency and microwave frequencies. This novel trapping scheme can be implemented with current technology for micro-fabrication and electronic control. PMID:25348163
Guided and magnetic self-assembly of tunable magnetoceptive gels
Tasoglu, S.; Yu, C.H.; Gungordu, H.I.; Guven, S.; Vural, T.; Demirci, U.
2014-01-01
Self-assembly of components into complex functional patterns at microscale is common in nature, and used increasingly in numerous disciplines such as optoelectronics, microfabrication, sensors, tissue engineering and computation. Here, we describe the use of stable radicals to guide the self-assembly of magnetically tunable gels, which we call ‘magnetoceptive’ materials at the scale of hundreds of microns to a millimeter, each can be programmed by shape and composition, into heterogeneous complex structures. Using paramagnetism of free radicals as a driving mechanism, complex heterogeneous structures are built in the magnetic field generated by permanent magnets. The overall magnetic signature of final structure is erased via an antioxidant vitamin E, subsequent to guided self-assembly. We demonstrate unique capabilities of radicals and antioxidants in fabrication of soft systems with heterogeneity in material properties, such as porosity, elastic modulus and mass density; then in bottom-up tissue engineering and finally, levitational and selective assembly of microcomponents. PMID:25175148
Advances in Miniaturized Instruments for Genomics
2014-01-01
In recent years, a lot of demonstrations of the miniaturized instruments were reported for genomic applications. They provided the advantages of miniaturization, automation, sensitivity, and specificity for the development of point-of-care diagnostics. The aim of this paper is to report on recent developments on miniaturized instruments for genomic applications. Based on the mature development of microfabrication, microfluidic systems have been demonstrated for various genomic detections. Since one of the objectives of miniaturized instruments is for the development of point-of-care device, impedimetric detection is found to be a promising technique for this purpose. An in-depth discussion of the impedimetric circuits and systems will be included to provide total consideration of the miniaturized instruments and their potential application towards real-time portable imaging in the “-omics” era. The current excellent demonstrations suggest a solid foundation for the development of practical and widespread point-of-care genomic diagnostic devices. PMID:25114919
Suspended Carbon Nanotubes for Humidity Sensing
Arunachalam, Shivaram; Gupta, Anubha A.; Izquierdo, Ricardo
2018-01-01
A room temperature microfabrication technique using SU8, an epoxy-based highly functional photoresist as a sacrificial layer, is developed to obtain suspended aligned carbon nanotube beams. The humidity-sensing characteristics of aligned suspended single-walled carbon nanotube films are studied. A comparative study between suspended and non-suspended architectures is done by recording the resistance change in the nanotubes under humidity. For the tests, the humidity was varied from 15% to 98% RH. A comparative study between suspended and non-suspended devices shows that the response and recovery times of the suspended devices was found to be almost 3 times shorter than the non-suspended devices. The suspended devices also showed minimal hysteresis even after 10 humidity cycles, and also exhibit enhanced sensitivity. Repeatability tests were performed by subjecting the sensors to continuous humidification cycles. All tests reported here have been performed using pristine non-functionalized nanotubes. PMID:29786661
Suspended Carbon Nanotubes for Humidity Sensing.
Arunachalam, Shivaram; Gupta, Anubha A; Izquierdo, Ricardo; Nabki, Frederic
2018-05-22
A room temperature microfabrication technique using SU8, an epoxy-based highly functional photoresist as a sacrificial layer, is developed to obtain suspended aligned carbon nanotube beams. The humidity-sensing characteristics of aligned suspended single-walled carbon nanotube films are studied. A comparative study between suspended and non-suspended architectures is done by recording the resistance change in the nanotubes under humidity. For the tests, the humidity was varied from 15% to 98% RH. A comparative study between suspended and non-suspended devices shows that the response and recovery times of the suspended devices was found to be almost 3 times shorter than the non-suspended devices. The suspended devices also showed minimal hysteresis even after 10 humidity cycles, and also exhibit enhanced sensitivity. Repeatability tests were performed by subjecting the sensors to continuous humidification cycles. All tests reported here have been performed using pristine non-functionalized nanotubes.
NASA Astrophysics Data System (ADS)
Wakayama, Takayuki; Kobayashi, Toshinari; Iwata, Nobuya; Tanifuji, Nozomi; Matsuda, Yasuaki; Yamada, Syoji
2003-12-01
We present here new cantilevers for scanning probe microscopy (SPM) and sensor applications, which consist of silicon cantilever beam and ceramic pedestal. Silicon is only used to make cantilever beams and tips. Precision-machinery-made ceramics replaces silicon pedestal part. The ceramics was recently developed by Sumikin Ceramics and Quarts Co., Ltd. and can be machined precisely with end mill cutting. Many silicon beams are fabricated at once from a wafer using batch fabrication method. Therefore, SPM probes can be fabricated in high productivity and in low cost. These beams are transferred with transfer technique and are bonded on the ceramic pedestal with epoxy glue. We demonstrate here atomic force microscope (AFM) and gas sensor applications of the hybrid structure. In a gas sensor application, the ends of the cantilever are selectively modified with zeolite crystals as a sensitive layer. The bonding strength is enough for each application.
Surface structure determines dynamic wetting.
Wang, Jiayu; Do-Quang, Minh; Cannon, James J; Yue, Feng; Suzuki, Yuji; Amberg, Gustav; Shiomi, Junichiro
2015-02-16
Liquid wetting of a surface is omnipresent in nature and the advance of micro-fabrication and assembly techniques in recent years offers increasing ability to control this phenomenon. Here, we identify how surface roughness influences the initial dynamic spreading of a partially wetting droplet by studying the spreading on a solid substrate patterned with microstructures just a few micrometers in size. We reveal that the roughness influence can be quantified in terms of a line friction coefficient for the energy dissipation rate at the contact line, and that this can be described in a simple formula in terms of the geometrical parameters of the roughness and the line-friction coefficient of the planar surface. We further identify a criterion to predict if the spreading will be controlled by this surface roughness or by liquid inertia. Our results point to the possibility of selectively controlling the wetting behavior by engineering the surface structure.
Deformation analysis of MEMS structures by modified digital moiré methods
NASA Astrophysics Data System (ADS)
Liu, Zhanwei; Lou, Xinhao; Gao, Jianxin
2010-11-01
Quantitative deformation analysis of micro-fabricated electromechanical systems is of importance for the design and functional control of microsystems. In this paper, two modified digital moiré processing methods, Gaussian blurring algorithm combined with digital phase shifting and geometrical phase analysis (GPA) technique based on digital moiré method, are developed to quantitatively analyse the deformation behaviour of micro-electro-mechanical system (MEMS) structures. Measuring principles and experimental procedures of the two methods are described in detail. A digital moiré fringe pattern is generated by superimposing a specimen grating etched directly on a microstructure surface with a digital reference grating (DRG). Most of the grating noise is removed from the digital moiré fringes, which enables the phase distribution of the moiré fringes to be obtained directly. Strain measurement result of a MEMS structure demonstrates the feasibility of the two methods.
Quality Control Method for a Micro-Nano-Channel Microfabricated Device
NASA Technical Reports Server (NTRS)
Grattoni, Alessandro; Ferrari, Mauro; Li, Xuewu
2012-01-01
A variety of silicon-fabricated devices is used in medical applications such as drug and cell delivery, and DNA and protein separation and analysis. When a fluidic device inlet is connected to a compressed gas reservoir, and the outlet is at a lower pressure, a gas flow occurs through the membrane toward the outside. The method relies on the measurement of the gas pressure over the elapsed time inside the upstream and downstream environments. By knowing the volume of the upstream reservoir, the gas flow rate through the membrane over the pressure drop can be calculated. This quality control method consists of measuring the gas flow through a device and comparing the results with a standard curve, which can be obtained by testing standard devices. Standard devices can be selected through a variety of techniques, both destructive and nondestructive, such as SEM, AFM, and standard particle filtration.
On-Chip High-Finesse Fabry-Perot Microcavities for Optical Sensing and Quantum Information.
Bitarafan, Mohammad H; DeCorby, Ray G
2017-07-31
For applications in sensing and cavity-based quantum computing and metrology, open-access Fabry-Perot cavities-with an air or vacuum gap between a pair of high reflectance mirrors-offer important advantages compared to other types of microcavities. For example, they are inherently tunable using MEMS-based actuation strategies, and they enable atomic emitters or target analytes to be located at high field regions of the optical mode. Integration of curved-mirror Fabry-Perot cavities on chips containing electronic, optoelectronic, and optomechanical elements is a topic of emerging importance. Micro-fabrication techniques can be used to create mirrors with small radius-of-curvature, which is a prerequisite for cavities to support stable, small-volume modes. We review recent progress towards chip-based implementation of such cavities, and highlight their potential to address applications in sensing and cavity quantum electrodynamics.
Rapid laser fabrication of microlens array using colorless liquid photopolymer for AMOLED devices
NASA Astrophysics Data System (ADS)
Kim, Kwang-Ryul; Jeong, Han-Wook; Lee, Kong-Soo; Yi, Junsin; Yoo, Jae-Chern; Cho, Myung-Woo; Cho, Sung-Hak; Choi, Byoungdeog
2011-01-01
Microlens array (MLA) is microfabricated using Ultra Violet (UV) laser for display device applications. A colorless liquid photopolymer, Norland Optical Adhesive (NOA) 60, is spin-coated and pre-cured via UV light for completing the laser process. The laser energy controlled by a galvano scanner is radiated on the surface of the NOA 60. A rapid thermal volume expansion inside the material creates microlens array when the Gaussian laser energy is absorbed. The fabrication process conditions for various shapes and densities of MLA using a non-contact surface profiler are investigated. Furthermore, we analyze the optical and display characteristics for the Organic Light Emitting Diode (OLED) devices. Optimized condition furnishes the OLED with the enhancement of light emission by 15%. We show that UV laser technique, which is installed with NOA 60 MLA layer, is eligible for improving the performance of the next generation display devices.
On-Chip High-Finesse Fabry-Perot Microcavities for Optical Sensing and Quantum Information
Bitarafan, Mohammad H.; DeCorby, Ray G.
2017-01-01
For applications in sensing and cavity-based quantum computing and metrology, open-access Fabry-Perot cavities—with an air or vacuum gap between a pair of high reflectance mirrors—offer important advantages compared to other types of microcavities. For example, they are inherently tunable using MEMS-based actuation strategies, and they enable atomic emitters or target analytes to be located at high field regions of the optical mode. Integration of curved-mirror Fabry-Perot cavities on chips containing electronic, optoelectronic, and optomechanical elements is a topic of emerging importance. Micro-fabrication techniques can be used to create mirrors with small radius-of-curvature, which is a prerequisite for cavities to support stable, small-volume modes. We review recent progress towards chip-based implementation of such cavities, and highlight their potential to address applications in sensing and cavity quantum electrodynamics. PMID:28758967
C-MEMS for bio-sensing applications
NASA Astrophysics Data System (ADS)
Song, Yin; Agrawal, Richa; Wang, Chunlei
2015-05-01
Developing highly sensitive, selective, and reproducible miniaturized bio-sensing platforms require reliable biointerface which should be compatible with microfabrication techniques. In this study, we have fabricated pyrolyzed carbon arrays with high surface area as a bio-sensing electrode, and developed the surface functionalization methods to increase biomolecules immobilization efficiency and further understand electrochemical phenomena at biointerfaces. The carbon microelectrode arrays with high aspect ratio have been fabricated by carbon microelectromechanical systems (C-MEMS) and nanomaterials such as graphene have been integrated to further increase surface area. To achieve the efficient covalent immobilization of biomolecules, various oxidation and reduction functionalization methods have been investigated. The oxidation treatment in this study includes vacuum ultraviolet, electrochemical activation, UV/Ozone and oxygen RIE. The reduction treatment includes direct amination and diazonium grafting. The developed bio-sensing platform was then applied for several applications, such as: DNA sensor; H2O2 sensor; aptamer sensor and HIV sensor.
A Novel Technique for Micro-patterning Proteins and Cells on Polyacrylamide Gels
Tang, Xin; Ali, M. Yakut; Saif, M. Taher A.
2012-01-01
Spatial patterning of proteins (extracellular matrix, ECM) for living cells on polyacrylamide (PA) hydrogels has been technically challenging due to the compliant nature of the hydrogels and their aqueous environment. Traditional micro-fabrication process is not applicable. Here we report a simple, novel and general method to pattern a variety of commonly used cell adhesion molecules, i.e. Fibronectin (FN), Laminin (LN) and Collagen I (CN), etc. on PA gels. The pattern is first printed on a hydrophilic glass using polydimethylsiloxane (PDMS) stamp and micro-contact printing (μCP). Pre-polymerization solution is applied on the patterned glass and is then sandwiched by a functionalized glass slide, which covalently binds to the gel. The hydrophilic glass slide is then peeled off from the gel when the protein patterns detach from the glass, but remain intact with the gel. The pattern is thus transferred to the gel. The mechanism of pattern transfer is studied in light of interfacial mechanics. It is found that hydrophilic glass offers strong enough adhesion with ECM proteins such that a pattern can be printed, but weak enough adhesion such that they can be completely peeled off by the polymerized gel. This balance is essential for successful pattern transfer. As a demonstration, lines of FN, LN and CN with widths varying from 5–400 μm are patterned on PA gels. Normal fibroblasts (MKF) are cultured on the gel surfaces. The cell attachment and proliferation are confined within these patterns. The method avoids the use of any toxic chemistry often used to pattern different proteins on gel surfaces. PMID:23002394
NASA Astrophysics Data System (ADS)
Floyd, J. G.; Beeler, S. R.; Mors, R. A.; Kraus, E. A.; 2016, G.; Piazza, O.; Frantz, C. M.; Loyd, S. J.; Berelson, W.; Stevenson, B. S.; Marenco, P. J.; Spear, J. R.; Corsetti, F. A.
2016-12-01
Hot spring environments exhibit unique redox/physical gradients that may create favorable conditions for the presence of life and commonly contain mineral precipitates that could provide a geologic archive of such ecosystems on Earth and potentially other planets. However, it is critical to discern biologic from abiotic formation mechanisms if hot spring-associated minerals are to be used as biosignatures. The study of modern hot spring environments where mineral formation can be directly observed is necessary to better interpret the biogenicity of ancient/extraterrestrial examples. Little Hot Creek (LHC), a hot spring located in the Long Valley Caldera, California, contains mineral precipitates composed of a carbonate base covered with amorphous silica and minor carbonate in close association with microbial mats/biofilms. Geological, geochemical, and microbiological techniques were integrated to investigate the role of biology in mineral formation at LHC. Geochemical measurements indicate that the waters of the spring are near equilibrium with respect to carbonate and undersaturated with respect to silica, implying additional processes are necessary to initiate cap formation. Geochemical modeling, integrating elemental and isotopic data from hot spring water and mineral precipitates, indicate that the abiotic processes of degassing and evaporation drive mineral formation at LHC, without microbial involvement. However, petrographic analysis of LHC caps revealed microbial microfabrics within silica mineral phases, despite the fact that microbial metabolism was not required for mineral precipitation. Our results show that microorganisms in hot spring environments can shape mineral precipitates even in the absence of a control on authigenesis, highlighting the need for structural as well as geochemical investigation in similar systems.
A Microfabricated Involute-Foil Regenerator for Stirling Engines
NASA Technical Reports Server (NTRS)
Tew, Roy; Ibrahim, Mounir; Danila, Daniel; Simon, Terrence; Mantell, Susan; Sun, Liyong; Gedeon, David; Kelly, Kevin; McLean, Jeffrey; Qiu, Songgang
2007-01-01
A segmented involute-foil regenerator has been designed, microfabricated and tested in an oscillating-flow rig with excellent results. During the Phase I effort, several approximations of parallel-plate regenerator geometry were chosen as potential candidates for a new microfabrication concept. Potential manufacturers and processes were surveyed. The selected concept consisted of stacked segmented-involute-foil disks (or annular portions of disks), originally to be microfabricated from stainless-steel via the LiGA (lithography, electroplating, and molding) process and EDM. During Phase II, re-planning of the effort led to test plans based on nickel disks, microfabricated via the LiGA process, only. A stack of nickel segmented-involute-foil disks was tested in an oscillating-flow test rig. These test results yielded a performance figure of merit (roughly the ratio of heat transfer to pressure drop) of about twice that of the 90 percent random fiber currently used in small approx.100 W Stirling space-power convertors-in the Reynolds Number range of interest (50 to 100). A Phase III effort is now underway to fabricate and test a segmented-involute-foil regenerator in a Stirling convertor. Though funding limitations prevent optimization of the Stirling engine geometry for use with this regenerator, the Sage computer code will be used to help evaluate the engine test results. Previous Sage Stirling model projections have indicated that a segmented-involute-foil regenerator is capable of improving the performance of an optimized involute-foil engine by 6 to 9 percent; it is also anticipated that such involute-foil geometries will be more reliable and easier to manufacture with tight-tolerance characteristics, than random-fiber or wire-screen regenerators. Beyond the near-term Phase III regenerator fabrication and engine testing, other goals are (1) fabrication from a material suitable for high temperature Stirling operation (up to 850 C for current engines; up to 1200 C for a potential engine-cooler for a Venus mission), and (2) reduction of the cost of the fabrication process to make it more suitable for terrestrial applications of segmented involute foils. Past attempts have been made to use wrapped foils to approximate the large theoretical figures of merit projected for parallel plates. Such metal wrapped foils have never proved very successful, apparently due to the difficulties of fabricating wrapped-foils with uniform gaps and maintaining the gaps under the stress of time-varying temperature gradients during start-up and shut-down, and relatively-steady temperature gradients during normal operation. In contrast, stacks of involute-foil disks, with each disk consisting of multiple involute-foil segments held between concentric circular ribs, have relatively robust structures. The oscillating-flow rig tests of the segmented-involute-foil regenerator have demonstrated a shift in regenerator performance strongly in the direction of the theoretical performance of ideal parallel-plate regenerators.
A Microfabricated Involute-Foil Regenerator for Stirling Engines
NASA Technical Reports Server (NTRS)
Tew, Roy; Ibrahim, Mounir; Danila, Daniel; Simon, Terry; Mantell, Susan; Sun, Liyong; Gedeon, David; Kelly, Kevin; McLean, Jeffrey; Wood, Gary;
2007-01-01
A segmented involute-foil regenerator has been designed, microfabricated and tested in an oscillating-flow rig with excellent results. During the Phase I effort, several approximations of parallel-plate regenerator geometry were chosen as potential candidates for a new microfabrication concept. Potential manufacturers and processes were surveyed. The selected concept consisted of stacked segmented-involute-foil disks (or annular portions of disks), originally to be microfabricated from stainless-steel via the LiGA (lithography, electroplating, and molding) process and EDM (electric discharge machining). During Phase II, re-planning of the effort led to test plans based on nickel disks, microfabricated via the LiGA process, only. A stack of nickel segmented-involute-foil disks was tested in an oscillating-flow test rig. These test results yielded a performance figure of merit (roughly the ratio of heat transfer to pressure drop) of about twice that of the 90% random fiber currently used in small 100 W Stirling space-power convertors in the Reynolds Number range of interest (50-100). A Phase III effort is now underway to fabricate and test a segmented-involute-foil regenerator in a Stirling convertor. Though funding limitations prevent optimization of the Stirling engine geometry for use with this regenerator, the Sage computer code will be used to help evaluate the engine test results. Previous Sage Stirling model projections have indicated that a segmented-involute-foil regenerator is capable of improving the performance of an optimized involute-foil engine by 6-9%; it is also anticipated that such involute-foil geometries will be more reliable and easier to manufacture with tight-tolerance characteristics, than random-fiber or wire-screen regenerators. Beyond the near-term Phase III regenerator fabrication and engine testing, other goals are (1) fabrication from a material suitable for high temperature Stirling operation (up to 850 C for current engines; up to 1200 C for a potential engine-cooler for a Venus mission), and (2) reduction of the cost of the fabrication process to make it more suitable for terrestrial applications of segmented involute foils. Past attempts have been made to use wrapped foils to approximate the large theoretical figures of merit projected for parallel plates. Such metal wrapped foils have never proved very successful, apparently due to the difficulties of fabricating wrapped-foils with uniform gaps and maintaining the gaps under the stress of time-varying temperature gradients during start-up and shut-down, and relatively-steady temperature gradients during normal operation. In contrast, stacks of involute-foil disks, with each disk consisting of multiple involute-foil segments held between concentric circular ribs, have relatively robust structures. The oscillating-flow rig tests of the segmented-involute-foil regenerator have demonstrated a shift in regenerator performance strongly in the direction of the theoretical performance of ideal parallel-plate regenerators.
NASA Astrophysics Data System (ADS)
Macente, Alice; Fusseis, Florian; Menegon, Luca; John, Timm
2016-04-01
Synkinematic reaction microfabrics carry important information on the kinetics, timing and rheology of tectonometamorphic processes. Despite being routinely interpreted in metamorphic and structural studies, reaction and deformation microfabrics are usually described in two dimensions. We applied Synchrotron-based x-ray microtomography to document the evolution of a pristine olivine gabbro into a deformed omphacite-garnet eclogite in 3D. In the investigated samples, which cover a strain gradient into a shear zone from the Western Gneiss Region (Norway) previously described by John et al., (2009), we focused on the spatial transformation of garnet coronas into elongated clusters of garnets. Our microtomographic data allowed us to quantify changes to the garnet volume, their shapes and their spatial arrangement. We combined microtomographic observations with light microscope- and backscatter electron images as well as electron microprobe- (EMPA) and electron backscatter diffraction (EBSD) analyses to correlate mineral composition and orientation data with the x-ray absorption signal of the same mineral grains. This allowed us to extrapolate our interpretation of the metamorphic microfabric evolution to the third dimension, effectively yielding a 4-dimensional dataset. We found that: - The x-ray absorption contrast between individual mineral phases in our microtomographic data is sufficient to allow the same petrographic observations than in light- and electron microscopy, but extended to 3D. - Amongst the major constituents of the synkinematic reactions, garnet is the only phase that can be segmented confidently from the microtomographic data. - With increasing deformation, the garnet volume increases from about 9% to 25%. - Garnet coronas in the gabbros never completely encapsulate olivine grains. This may indicate that the reaction progressed preferentially in some directions, but also leaves pathways for element transport to and from the olivines that are unobstructed by reaction products. - Neighbouring garnet coronas are interconnected, i.e. in direct contact to each other. From a mechanical point of view, we interpret touching garnet coronas that form a rigid, potentially load-supporting framework to affect the rheology of the rock. - In the most highly deformed eclogites, the oblate shapes of elongated garnet clusters reflect a deformational origin of the microfabrics. The clusters define a foliation, whose orientation and intensity we quantified using a star volume distribution algorithm. We interpret the aligned garnet clusters to direct synkinematic fluid flow and consequently influence the transport of dissolved chemical components. - EBSD on garnets shows that, there is no evidence for crystal plastic deformation and all the garnets are internally strain free and show a near-random crystal preferred orientation. There is, however evidence for minor fracturing. We interpret these observations as pointing to a mechanical disintegration of the garnet coronas during strain localisation, and their rearrangement into individual clusters. This process will have been supported by pressure solution/reprecipitation processes. Our study clearly demonstrates what 3- or even 4-dimensional data from reaction microfabrics can add to the understanding of metamorphic processes.
Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds
Giang, Ut-Binh T.; Lee, Dooyoung; King, Michael R.; DeLouise, Lisa A.
2008-01-01
We present a novel method to create cavities in PDMS that is simple and exhibits wide process latitude allowing control over the radius of curvature to form shallow concave pits or deep spherical cavities. PMID:18030383
Method For Chemical Sensing Using A Microfabricated Teeter-Totter Resonator
Adkins, Douglas Ray; Heller, Edwin J.; Shul, Randy J.
2004-11-30
A method for sensing a chemical analyte in a fluid stream comprises providing a microfabricated teeter-totter resonator that relies upon a Lorentz force to cause oscillation in a paddle, applying a static magnetic field substantially aligned in-plane with the paddle, energizing a current conductor line on a surface of the paddle with an alternating electrical current to generate the Lorentz force, exposing the resonator to the analyte, and detecting the response of the oscillatory motion of the paddle to the chemical analyte. Preferably, a chemically sensitive coating is disposed on at least one surface of the paddle to enhance the sorption of the analyte by the paddle. The concentration of the analyte in a fluid stream can be determined by measuring the change in the resonant frequency or phase of the teeter-totter resonator as the chemical analyte is added to or removed from the paddle.
NASA Astrophysics Data System (ADS)
Pea Anka Project Group; Buth, G.; Doyle, S.; Einfeld, D.; Hagelstein, M.; Hermle, S.; Huttel, E.; Krüssel, A.; Lange, M.; Mathis, Y.-L.; Mexner, W.; Moser, H. O.; Pellegrin, E.; Ristau, U.; Rossmanith, R.; Schaper, J.; Schieler, H.; Simon, R.; Steininger, R.; Voigt, S.; Walther, R.; Perez, F.; Pont, M.; Plesko, M.
1998-03-01
ANKA (Angströmquelle Karlsruhe) is a state-of-the-art synchrotron radiation facility under construction at the Forschungszentrum Karlsruhe. Based on a 2.5 GeV electron storage ring it will deliver photons predominantly in the hard X-ray range but it will also feature both XUV and infrared beamlines. In its first operational phase the radiation will be taken out of normal-conducting dipole bending magnets, while five free long straight sections are foreseen to accommodate insertion devices later on. ANKA has a novel mission, namely to provide synchrotron-radiation based services to industrial and other customers, in the fields of microfabrication and materials analysis. A limited liability company, ANKA GmbH, is being founded to operate the facility. Although commercial services to customers will represent more than half of the overall activity, these services will be complemented by providing beam time for research users.
NASA Astrophysics Data System (ADS)
Gnerlich, Markus; Ben-Yoav, Hadar; Culver, James N.; Ketchum, Douglas R.; Ghodssi, Reza
2015-10-01
A three-dimensional micro-supercapacitor has been developed using a novel bottom-up assembly method combining genetically modified Tobacco mosaic virus (TMV-1Cys), photolithographically defined micropillars and selective deposition of ruthenium oxide on multi-metallic microelectrodes. The three-dimensional microelectrodes consist of a titanium nitride current collector with two functionalized areas: (1) gold coating on the active electrode area promotes TMV-1Cys adhesion, and (2) sacrificial nickel pads dissolve in ruthenium tetroxide plating solution to produce ruthenium oxide on all electrically connected areas. The microfabricated electrodes are arranged in an interdigitated pattern, and the capacitance per electrode has been measured as high as 203 mF cm-2 with solid Nafion electrolyte. The process integration of bio-templated ruthenium oxide with microfabricated electrodes and solid electrolyte is an important advance towards the energy storage needs of mass produced self-sufficient micro-devices.
Study on the stability and reliability of Clinotron at Y-band
NASA Astrophysics Data System (ADS)
Li, Shuang; Wang, Jianguo; Chen, Zaigao; Wang, Guangqiang; Wang, Dongyang; Teng, Yan
2017-11-01
To improve the stability and reliability of Clinotron at the Y-band, some key issues are researched, such as the synchronous operating mode, the heat accumulation on the slow-wave structure, and the errors in micro-fabrication. By analyzing the dispersion relationship, the working mode is determined as the TM10 mode. The problem of heat dissipation on a comb is researched to make a trade-off on the choice of suitable working conditions, making sure that the safety and efficiency of the device are guaranteed simultaneously. The study on the effect of tolerance on device's performance is also conducted to determine the acceptable error during micro-fabrication. The validity of the device and the cost for fabrication are both taken into consideration. At last, the performance of Clinotron under the optimized conditions demonstrates that it can work steadily at 315.89 GHz and the output power is about 12 W, showing advanced stability and reliability.
Vapour sensitivity of an ALD hierarchical photonic structure inspired by Morpho.
Poncelet, Olivier; Tallier, Guillaume; Mouchet, Sébastien R; Crahay, André; Rasson, Jonathan; Kotipalli, Ratan; Deparis, Olivier; Francis, Laurent A
2016-05-09
The unique architecture of iridescent Morpho butterfly scales is known to exhibit different optical responses to various vapours. However, the mechanism behind this phenomenon is not fully quantitatively understood. This work reports on process developments in the micro-fabrication of a Morpho-inspired photonic structure in atomic layer deposited (ALD) materials in order to investigate the vapour optical sensitivity of such artificial nanostructures. By developing recipes for dry and wet etching of ALD oxides, we micro-fabricated two structures: one combining Al2O3 and TiO2, and the other combining Al2O3 and HfO2. For the first time, we report the optical response of such ALD Morpho-like structures measured under a controlled flow of either ethanol or isopropyl alcohol (IPA) vapour. In spite of the small magnitude of the effect, the results show a selective vapour response (depending on the materials used).
Flexible shape-memory scaffold for minimally invasive delivery of functional tissues
NASA Astrophysics Data System (ADS)
Montgomery, Miles; Ahadian, Samad; Davenport Huyer, Locke; Lo Rito, Mauro; Civitarese, Robert A.; Vanderlaan, Rachel D.; Wu, Jun; Reis, Lewis A.; Momen, Abdul; Akbari, Saeed; Pahnke, Aric; Li, Ren-Ke; Caldarone, Christopher A.; Radisic, Milica
2017-10-01
Despite great progress in engineering functional tissues for organ repair, including the heart, an invasive surgical approach is still required for their implantation. Here, we designed an elastic and microfabricated scaffold using a biodegradable polymer (poly(octamethylene maleate (anhydride) citrate)) for functional tissue delivery via injection. The scaffold’s shape memory was due to the microfabricated lattice design. Scaffolds and cardiac patches (1 cm × 1 cm) were delivered through an orifice as small as 1 mm, recovering their initial shape following injection without affecting cardiomyocyte viability and function. In a subcutaneous syngeneic rat model, injection of cardiac patches was equivalent to open surgery when comparing vascularization, macrophage recruitment and cell survival. The patches significantly improved cardiac function following myocardial infarction in a rat, compared with the untreated controls. Successful minimally invasive delivery of human cell-derived patches to the epicardium, aorta and liver in a large-animal (porcine) model was achieved.
Garcia, Ernest J.; Sniegowski, Jeffry J.
1997-01-01
A microengine uses two synchronized linear actuators as a power source and converts oscillatory motion from the actuators into rotational motion via direct linkage connection to an output gear or wheel. The microengine provides output in the form of a continuously rotating output gear that is capable of delivering drive torque to a micromechanism. The microengine can be operated at varying speeds and its motion can be reversed. Linear actuators are synchronized in order to provide linear oscillatory motion to the linkage means in the X and Y directions according to a desired position, rotational direction and speed of said mechanical output means. The output gear has gear teeth on its outer perimeter for directly contacting a micromechanism requiring mechanical power. The gear is retained by a retaining means which allows said gear to rotate freely. The microengine is microfabricated of polysilicon on one wafer using surface micromachining batch fabrication.
Ram-air sample collection device for a chemical warfare agent sensor
Megerle, Clifford A.; Adkins, Douglas R.; Frye-Mason, Gregory C.
2002-01-01
In a surface acoustic wave sensor mounted within a body, the sensor having a surface acoustic wave array detector and a micro-fabricated sample preconcentrator exposed on a surface of the body, an apparatus for collecting air for the sensor, comprising a housing operatively arranged to mount atop the body, the housing including a multi-stage channel having an inlet and an outlet, the channel having a first stage having a first height and width proximate the inlet, a second stage having a second lower height and width proximate the micro-fabricated sample preconcentrator, a third stage having a still lower third height and width proximate the surface acoustic wave array detector, and a fourth stage having a fourth height and width proximate the outlet, where the fourth height and width are substantially the same as the first height and width.
Development and investigation of flexible polymer neural probe for chronic neural recording
NASA Astrophysics Data System (ADS)
Smith, Courtney; Song, Kyo D.; Yoon, Hargsoon; Kim, Woong-Ki; Zeng, Tao; Sanford, Larry D.
2012-04-01
Neural recording through microelectrodes requires biocompatibility and long term chronic usage. With a potential for various applications and effort to improve the performance of neural recording probes, consideration is taken to the tissue and cellular effects in these device designs. The degeneration of neurons due to brain tissue motion is an issue along with brain tissue inflammation in the insertion of the probes. To account for motion and irritation the material structure of the probes must be improved upon. This research presents the fabrication of neural probes on the microscale utilizing flexible polymers. Polyimide neural probes have been considered possibly to reduce degradation in their variability caused by brain motion. The microfabrication of the polyimide neural probe has an increased flexibility while accounting for biocompatibility and the needs for chronic use. Through microfabrication processes a needle probe is produced and tested for neural recording.
Microfabricated rankine cycle steam turbine for power generation and methods of making the same
NASA Technical Reports Server (NTRS)
Muller, Norbert (Inventor); Lee, Changgu (Inventor); Frechette, Luc (Inventor)
2009-01-01
In accordance with the present invention, an integrated micro steam turbine power plant on-a-chip has been provided. The integrated micro steam turbine power plant on-a-chip of the present invention comprises a miniature electric power generation system fabricated using silicon microfabrication technology and lithographic patterning. The present invention converts heat to electricity by implementing a thermodynamic power cycle on a chip. The steam turbine power plant on-a-chip generally comprises a turbine, a pump, an electric generator, an evaporator, and a condenser. The turbine is formed by a rotatable, disk-shaped rotor having a plurality of rotor blades disposed thereon and a plurality of stator blades. The plurality of stator blades are interdigitated with the plurality of rotor blades to form the turbine. The generator is driven by the turbine and converts mechanical energy into electrical energy.
Field ionization characteristics of an ion source array for neutron generators
NASA Astrophysics Data System (ADS)
Bargsten Johnson, B.; Schwoebel, P. R.; Resnick, P. J.; Holland, C. E.; Hertz, K. L.; Chichester, D. L.
2013-11-01
A new deuterium ion source is being developed to improve the performance of existing compact neutron generators. The ion source is a microfabricated array of metal tips with an integrated gate (i.e., grid) and produces deuterium ions by field ionizing (or field desorbing) a supply of deuterium gas. Deuterium field ion currents from arrays at source temperatures of 77 K and 293 K are studied. Ion currents from single etched-wire tips operating under the same conditions are used to help understand array results. I-F characteristics of the arrays were found to follow trends similar to those of the better understood single etched-wire tip results; however, the fields achieved by the arrays are limited by electrical breakdown of the structure. Neutron production by field ionization at 293 K was demonstrated for the first time from microfabricated array structures with integrated gates.
Experimental system design for the integration of trapped-ion and superconducting qubit systems
NASA Astrophysics Data System (ADS)
De Motte, D.; Grounds, A. R.; Rehák, M.; Rodriguez Blanco, A.; Lekitsch, B.; Giri, G. S.; Neilinger, P.; Oelsner, G.; Il'ichev, E.; Grajcar, M.; Hensinger, W. K.
2016-12-01
We present a design for the experimental integration of ion trapping and superconducting qubit systems as a step towards the realization of a quantum hybrid system. The scheme addresses two key difficulties in realizing such a system: a combined microfabricated ion trap and superconducting qubit architecture, and the experimental infrastructure to facilitate both technologies. Developing upon work by Kielpinski et al. (Phys Rev Lett 108(13):130504, 2012. doi: 10.1103/PhysRevLett.108.130504), we describe the design, simulation and fabrication process for a microfabricated ion trap capable of coupling an ion to a superconducting microwave LC circuit with a coupling strength in the tens of kHz. We also describe existing difficulties in combining the experimental infrastructure of an ion trapping set-up into a dilution refrigerator with superconducting qubits and present solutions that can be immediately implemented using current technology.
"Data characterizing microfabricated human blood vessels created via hydrodynamic focusing".
DiVito, Kyle A; Daniele, Michael A; Roberts, Steven A; Ligler, Frances S; Adams, André A
2017-10-01
This data article provides further detailed information related to our research article titled "Microfabricated Blood Vessels Undergo Neovascularization" (DiVito et al., 2017) [1], in which we report fabrication of human blood vessels using hydrodynamic focusing (HDF). Hydrodynamic focusing with advection inducing chevrons were used in concert to encase one fluid stream within another, shaping the inner core fluid into 'bullseye-like" cross-sections that were preserved through click photochemistry producing streams of cellularized hollow 3-dimensional assemblies, such as human blood vessels (Daniele et al., 2015a, 2015b, 2014, 2016; Roberts et al., 2016) [2], [3], [4], [5], [6]. Applications for fabricated blood vessels span general tissue engineering to organ-on-chip technologies, with specific utility in in vitro drug delivery and pharmacodynamics studies. Here, we report data regarding the construction of blood vessels including cellular composition and cell positioning within the engineered vascular construct as well as functional aspects of the tissues.
NASA Astrophysics Data System (ADS)
Cicek, Paul-Vahe; Elsayed, Mohannad; Nabki, Frederic; El-Gamal, Mourad
2017-11-01
An above-IC compatible multi-level MEMS surface microfabrication technology based on a silicon carbide structural layer is presented. The fabrication process flow provides optimal electrostatic transduction by allowing the creation of independently controlled submicron vertical and lateral gaps without the need for high resolution lithography. Adopting silicon carbide as the structural material, the technology ensures material, chemical and thermal compatibility with modern semiconductor nodes, reporting the lowest peak processing temperature (i.e. 200 °C) of all comparable works. This makes this process ideally suited for integrating capacitive-based MEMS directly above standard CMOS substrates. Process flow design and optimization are presented in the context of bulk-mode disk resonators, devices that are shown to exhibit improved performance with respect to previous generation flexural beam resonators, and that represent relatively complex MEMS structures. The impact of impending improvements to the fabrication technology is discussed.
Non-planar microfabricated gas chromatography column
Lewis, Patrick R.; Wheeler, David R.
2007-09-25
A non-planar microfabricated gas chromatography column comprises a planar substrate having a plurality of through holes, a top lid and a bottom lid bonded to opposite surfaces of the planar substrate, and inlet and outlet ports for injection of a sample gas and elution of separated analytes. A plurality of such planar substrates can be aligned and stacked to provide a longer column length having a small footprint. Furthermore, two or more separate channels can enable multi-channel or multi-dimensional gas chromatography. The through holes preferably have a circular cross section and can be coated with a stationary phase material or packed with a porous packing material. Importantly, uniform stationary phase coatings can be obtained and band broadening can be minimized with the circular channels. A heating or cooling element can be disposed on at least one of the lids to enable temperature programming of the column.
DOE Office of Scientific and Technical Information (OSTI.GOV)
Gnerlich, Markus; Ben-Yoav, Hadar; Culver, James N.
A three-dimensional micro-supercapacitor has been developed using a novel bottom-up assembly method combining genetically modified Tobacco mosaic virus (TMV-1Cys), photolithographically defined micropillars and selective deposition of ruthenium oxide on multi-metallic microelectrodes. The three-dimensional microelectrodes consist of a titanium nitride current collector with two functionalized areas: (1) gold coating on the active electrode area promotes TMV-1Cys adhesion, and (2) sacrificial nickel pads dissolve in ruthenium tetroxide plating solution to produce ruthenium oxide on all electrically connected areas. The microfabricated electrodes are arranged in an interdigitated pattern, and the capacitance per electrode has been measured as high as 203 mF cm-2 withmore » solid Nafion electrolyte. The process integration of bio-templated ruthenium oxide with microfabricated electrodes and solid electrolyte is an important advance towards the energy storage needs of mass produced self-sufficient micro-devices.« less
NASA Technical Reports Server (NTRS)
Tew, Roy; Ibrahim, Mounir; Simon, Terry; Mantell, Susan; Gedeon, David; Qiu, Songgang; Wood, Gary
2004-01-01
This paper win report on continuation through the third year of a NASA grant for multi-dimensional Stirling CFD code development and validation; continuation through the third and final year of a Department of Energy, Golden Field Office (DOE), regenerator research effort and a NASA grant for continuation of the effort through two additional years; and a new NASA Research Award for design, microfabrication and testing of a "Next Generation Stirling Engine Regenerator." Cleveland State University (CSU) is the lead organization for all three efforts, with the University of Minnesota (UMN) and Gedeon Associates as subcontractors. The Stirling Technology Company and Sun power, Inc. acted as unfunded consultants or participants through the third years of both the NASA multi-D code development and DOE regenerator research efforts; they win both be subcontractors on the new regenerator microfabrication contract.
Ultra-fast, label-free isolation of circulating tumor cells from blood using spiral microfluidics.
Warkiani, Majid Ebrahimi; Khoo, Bee Luan; Wu, Lidan; Tay, Andy Kah Ping; Bhagat, Ali Asgar S; Han, Jongyoon; Lim, Chwee Teck
2016-01-01
Circulating tumor cells (CTCs) are rare cancer cells that are shed from primary or metastatic tumors into the peripheral blood circulation. Phenotypic and genetic characterization of these rare cells can provide important information to guide cancer staging and treatment, and thus further research into their characteristics and properties is an area of considerable interest. In this protocol, we describe detailed procedures for the production and use of a label-free spiral microfluidic device to allow size-based isolation of viable CTCs using hydrodynamic forces that are present in curvilinear microchannels. This spiral system enables us to achieve ≥ 85% recovery of spiked cells across multiple cancer cell lines and 99.99% depletion of white blood cells in whole blood. The described spiral microfluidic devices can be produced at an extremely low cost using standard microfabrication and soft lithography techniques (2-3 d), and they can be operated using two syringe pumps for lysed blood samples (7.5 ml in 12.5 min for a three-layered multiplexed chip). The fast processing time and the ability to collect CTCs from a large patient blood volume allows this technique to be used experimentally in a broad range of potential genomic and transcriptomic applications.
Nanostructure Engineered Chemical Sensors for Hazardous Gas and Vapor Detection
NASA Technical Reports Server (NTRS)
Li, Jing; Lu, Yijiang
2005-01-01
A nanosensor technology has been developed using nanostructures, such as single walled carbon nanotubes (SWNTs) and metal oxides nanowires or nanobelts, on a pair of interdigitated electrodes (IDE) processed with a silicon based microfabrication and micromachining technique. The IDE fingers were fabricated using thin film metallization techniques. Both in-situ growth of nanostructure materials and casting of the nanostructure dispersions were used to make chemical sensing devices. These sensors have been exposed to hazardous gases and vapors, such as acetone, benzene, chlorine, and ammonia in the concentration range of ppm to ppb at room temperature. The electronic molecular sensing in our sensor platform can be understood by electron modulation between the nanostructure engineered device and gas molecules. As a result of the electron modulation, the conductance of nanodevice will change. Due to the large surface area, low surface energy barrier and high thermal and mechanical stability, nanostructured chemical sensors potentially can offer higher sensitivity, lower power consumption and better robustness than the state-of-the-art systems, which make them more attractive for defense and space applications. Combined with MEMS technology, light weight and compact size sensors can be made in wafer scale with low cost.
Cell-free protein synthesis in PDMS-glass hybrid microreactor
NASA Astrophysics Data System (ADS)
Yamamoto, Takatoki; Fujii, Teruo; Nojima, Takahiko; Hong, Jong W.; Endo, Isao
2000-08-01
A living cell has numerous kinds of proteins while only thousands of that have been identified as of now. In order to discover and produce various proteins that are applicable to biotechnological, pharmaceutical and medical applications, cell-free protein synthesis is one of the most useful and promising techniques. In this study, we developed an inexpensive microreactor with temperature control capability for protein synthesis. The microreactor consists of a sandwich of glass-based chip and PDMS(polydimethylsiloxane) chip. The thermo control system, which is composed of a heater and a temperature sensor, is fabricated with an ITO (Indium Tin Oxide) resistive material on a glass substrate by ordinary microfabrication method based on photolithography and etching techniques. The reactor chamber and flow channels are fabricated by injection micromolding of PDMS. Since one can use thermo control system on a glass substrate repeatedly by replacing only the easily-fabricated and low-cost PDMS reactor chamber, this microreactor is quite cost effective. As a demonstration, a DNA template of a GFP (Green Fluorescent Protein) is transcribed and translated using cell-free extract prepared from Escherichia coli. As a result, GFP was successfully synthesized in the present microreactor.
NASA Astrophysics Data System (ADS)
Geremariam Welearegay, Tesfalem; Cindemir, Umut; Österlund, Lars; Ionescu, Radu
2018-02-01
Here, we report for the first time the fabrication of ligand-functionalised ultrapure monodispersed metal nanoparticles (Au, Cu, and Pt) from their pure metal precursors using the advanced gas deposition technique. The experimental conditions during nanoparticle formation were adjusted in order to obtain ultrafine isolated nanoparticles on different substrates. The morphology and surface analysis of the as-deposited metal nanoparticles were investigated using scanning electron microscopy, x-ray diffraction and Fourier transform infra-red spectroscopy, which demonstrated the formation of highly ordered pure crystalline nanoparticles with a relatively uniform size distribution of ∼10 nm (Au), ∼4 nm (Cu) and ∼3 nm (Pt), respectively. A broad range of organic ligands containing thiol or amine functional groups were attached to the nanoparticles to form continuous networks of nanoparticle-ligand nanoassemblies, which were characterised by scanning electron microscopy and x-ray photoelectron spectroscopy. The electrical resistance of the functional nanoassemblies deposited in the gap spacing of two microfabricated parallel Au electrodes patterned on silicon substrates ranged between tens of kΩ and tens of MΩ, which is suitable for use in many applications including (bio)chemical sensors, surface-enhanced Raman spectroscopy and molecular electronic rectifiers.
Ultra-high-Q phononic resonators on-chip at cryogenic temperatures
NASA Astrophysics Data System (ADS)
Kharel, Prashanta; Chu, Yiwen; Power, Michael; Renninger, William H.; Schoelkopf, Robert J.; Rakich, Peter T.
2018-06-01
Long-lived, high-frequency phonons are valuable for applications ranging from optomechanics to emerging quantum systems. For scientific as well as technological impact, we seek high-performance oscillators that offer a path toward chip-scale integration. Confocal bulk acoustic wave resonators have demonstrated an immense potential to support long-lived phonon modes in crystalline media at cryogenic temperatures. So far, these devices have been macroscopic with cm-scale dimensions. However, as we push these oscillators to high frequencies, we have an opportunity to radically reduce the footprint as a basis for classical and emerging quantum technologies. In this paper, we present novel design principles and simple microfabrication techniques to create high performance chip-scale confocal bulk acoustic wave resonators in a wide array of crystalline materials. We tailor the acoustic modes of such resonators to efficiently couple to light, permitting us to perform a non-invasive laser-based phonon spectroscopy. Using this technique, we demonstrate an acoustic Q-factor of 2.8 × 107 (6.5 × 106) for chip-scale resonators operating at 12.7 GHz (37.8 GHz) in crystalline z-cut quartz (x-cut silicon) at cryogenic temperatures.
Feng, Guo-Hua; Liu, Wei-Fan
2013-10-09
This paper presents the microfabrication of an acoustic impedance gradient matching layer on a spherically-shaped piezoelectric ultrasonic transducer. The acoustic matching layer can be designed to achieve higher acoustic energy transmission and operating bandwidth. Also included in this paper are a theoretical analysis of the device design and a micromachining technique to produce the novel transducer. Based on a design of a lead titanium zirconium (PZT) micropillar array, the constructed gradient acoustic matching layer has much better acoustic transmission efficiency within a 20-50 MHz operation range compared to a matching layer with a conventional quarter-wavelength thickness Parylene deposition. To construct the transducer, periodic microcavities are built on a flexible copper sheet, and then the sheet forms a designed curvature with a ball shaping. After PZT slurry deposition, the constructed PZT micropillar array is released onto a curved thin PZT layer. Following Parylene conformal coating on the processed PZT micropillars, the PZT micropillars and the surrounding Parylene comprise a matching layer with gradient acoustic impedance. By using the proposed technique, the fabricated transducer achieves a center frequency of 26 MHz and a -6 dB bandwidth of approximately 65%.
Nanoneedle insertion into the cell nucleus does not induce double-strand breaks in chromosomal DNA.
Ryu, Seunghwan; Kawamura, Ryuzo; Naka, Ryohei; Silberberg, Yaron R; Nakamura, Noriyuki; Nakamura, Chikashi
2013-09-01
An atomic force microscope probe can be formed into an ultra-sharp cylindrical shape (a nanoneedle) using micro-fabrication techniques such as focused ion beam etching. This nanoneedle can be effectively inserted through the plasma membrane of a living cell to not only access the cytosol, but also to penetrate through the nuclear membrane. This technique shows great potential as a tool for performing intranuclear measurements and manipulations. Repeated insertions of a nanoneedle into a live cell were previously shown not to affect cell viability. However, the effect of nanoneedle insertion on the nucleus and nuclear components is still unknown. DNA is the most crucial component of the nucleus for proper cell function and may be physically damaged by a nanoneedle. To investigate the integrity of DNA following nanoneedle insertion, the occurrence of DNA double-strand breaks (DSBs) was assessed. The results showed that there was no chromosomal DNA damage due to nanoneedle insertion into the nucleus, as indicated by the expression level of γ-H2AX, a molecular marker of DSBs. Copyright © 2013 The Society for Biotechnology, Japan. Published by Elsevier B.V. All rights reserved.
Wang, Lin; Acosta, Miguel A.; Leach, Jennie B.; Carrier, Rebecca L.
2013-01-01
Capability of measuring and monitoring local oxygen concentration at the single cell level (tens of microns scale) is often desirable but difficult to achieve in cell culture. In this study, biocompatible oxygen sensing beads were prepared and tested for their potential for real-time monitoring and mapping of local oxygen concentration in 3D micro-patterned cell culture systems. Each oxygen sensing bead is composed of a silica core loaded with both an oxygen sensitive Ru(Ph2phen3)Cl2 dye and oxygen insensitive Nile blue reference dye, and a poly-dimethylsiloxane (PDMS) shell rendering biocompatibility. Human intestinal epithelial Caco-2 cells were cultivated on a series of PDMS and type I collagen based substrates patterned with micro-well arrays for 3 or 7 days, and then brought into contact with oxygen sensing beads. Using an image analysis algorithm to convert florescence intensity of beads to partial oxygen pressure in the culture system, tens of microns-size oxygen sensing beads enabled the spatial measurement of local oxygen concentration in the microfabricated system. Results generally indicated lower oxygen level inside wells than on top of wells, and local oxygen level dependence on structural features of cell culture surfaces. Interestingly, chemical composition of cell culture substrates also appeared to affect oxygen level, with type-I collagen based cell culture systems having lower oxygen concentration compared to PDMS based cell culture systems. In general, results suggest that oxygen sensing beads can be utilized to achieve real-time and local monitoring of micro-environment oxygen level in 3D microfabricated cell culture systems. PMID:23443975
Wang, Lin; Acosta, Miguel A; Leach, Jennie B; Carrier, Rebecca L
2013-04-21
Capability of measuring and monitoring local oxygen concentration at the single cell level (tens of microns scale) is often desirable but difficult to achieve in cell culture. In this study, biocompatible oxygen sensing beads were prepared and tested for their potential for real-time monitoring and mapping of local oxygen concentration in 3D micro-patterned cell culture systems. Each oxygen sensing bead is composed of a silica core loaded with both an oxygen sensitive Ru(Ph2phen3)Cl2 dye and oxygen insensitive Nile blue reference dye, and a poly-dimethylsiloxane (PDMS) shell rendering biocompatibility. Human intestinal epithelial Caco-2 cells were cultivated on a series of PDMS and type I collagen based substrates patterned with micro-well arrays for 3 or 7 days, and then brought into contact with oxygen sensing beads. Using an image analysis algorithm to convert florescence intensity of beads to partial oxygen pressure in the culture system, tens of microns-size oxygen sensing beads enabled the spatial measurement of local oxygen concentration in the microfabricated system. Results generally indicated lower oxygen level inside wells than on top of wells, and local oxygen level dependence on structural features of cell culture surfaces. Interestingly, chemical composition of cell culture substrates also appeared to affect oxygen level, with type-I collagen based cell culture systems having lower oxygen concentration compared to PDMS based cell culture systems. In general, results suggest that oxygen sensing beads can be utilized to achieve real-time and local monitoring of micro-environment oxygen level in 3D microfabricated cell culture systems.
SCREEN-PRINTED TYROSINASE-CONTAINING ELECTRODES FOR THE BIOSENSING OF ENZYME INHIBITORS
Disposal amperometric inhibition biosensors have been microfabricated by screen printing a tyrosinase-containing carbon ink. The decrease in the substrate (catechol) steady-state current, caused by the addition of various pesticides and herbicides, offers convenient quantitation ...
NASA Astrophysics Data System (ADS)
Krohe, A.; Wassmann, S.; Trepmann, C.; Stoeckhert, B.
2009-12-01
The characteristic feature of the Franciscan Subduction Complex (FSC) is a chaotic mélange structure with centimeter- to about one kilometer-sized tectonic blocks composed of metabasalts, floating in a matrix of oceanic meta-sediments or, locally, serpentinites. Investigating map scale structures, microfabrics, and P-T-histories of the FSC, we try to gain information on the mechanical properties of rocks and their influence on the kinematics of material transport in a subduction channel. Structures and microfabrics indicate that metabasalts from the oceanic crust as well as mantle-derived ultramafic rocks (i) underwent fragmentation and sealing under high pore fluid pressure, (ii) remaining internally undeformed, or (iii) deform by dissolution precipitation creep. Importantly, microfabrics which would indicate crystal plastic deformation or dislocation creep are systematically absent. This means that, during the entire P-T history, differential stresses generally remained too low to activate crystal plastic deformation or dislocation creep. Hence the material in the subduction channel is characterized by a low strength, being either limited by brittle failure at high pore fluid pressure, or a Newton viscosity, which is expected for dissolution precipitation creep. We interpret the characteristic mélange structure as to reflect this mechanical state of the system: Brittle failure at quasi-lithostatic fluid pressures down to great depths is recorded in the tectonic blocks by the widespread occurrence of aragonite-bearing veins. This leads to fragmentation into the blocks of variable size and moderate aspect ratios, which behave as rigid inclusions in a flowing matrix with distributed deformation by dissolution precipitation creep. In contrast, a power law rheology characteristic for dislocation creep, would favor strain localization into shear zones at sites of stress concentration. However, such shear zones formed at high-P metamorphic conditions are not identified. Mechanical contrasts within the mélange are presumably governed by variations in grain sizes and the nature of interphase boundaries, which both control viscous deformation by dissolution precipitation creep. As such, huge viscosity contrasts between matrix and rigid blocks can persist during burial to HP metamorphic conditions and decompression, while the mélange is deformed to very high bulk strain. These findings pose constraints on the large scale properties of a subduction channel presently active at depth, to be identified by geophysical methods.
Malinauskas, Karolis; Palevicius, Paulius; Ragulskis, Minvydas; Ostasevicius, Vytautas; Dauksevicius, Rolanas
2013-01-01
Examination of wrist radial pulse is a noninvasive diagnostic method, which occupies a very important position in Traditional Chinese Medicine. It is based on manual palpation and therefore relies largely on the practitioner′s subjective technical skills and judgment. Consequently, it lacks reliability and consistency, which limits practical applications in clinical medicine. Thus, quantifiable characterization of the wrist pulse diagnosis method is a prerequisite for its further development and widespread use. This paper reports application of a noninvasive CCD sensor-based hybrid measurement system for radial pulse signal analysis. First, artery wall deformations caused by the blood flow are calibrated with a laser triangulation displacement sensor, following by the measurement of the deformations with projection moiré method. Different input pressures and fluids of various viscosities are used in the assembled artificial blood flow system in order to test the performance of laser triangulation technique with detection sensitivity enhancement through microfabricated retroreflective optical element placed on a synthetic vascular graft. Subsequently, the applicability of double-exposure whole-field projection moiré technique for registration of blood flow pulses is considered: a computational model and representative example are provided, followed by in vitro experiment performed on a vascular graft with artificial skin atop, which validates the suitability of the technique for characterization of skin surface deformations caused by the radial pulsation. PMID:23609803
Malinauskas, Karolis; Palevicius, Paulius; Ragulskis, Minvydas; Ostasevicius, Vytautas; Dauksevicius, Rolanas
2013-04-22
Examination of wrist radial pulse is a noninvasive diagnostic method, which occupies a very important position in Traditional Chinese Medicine. It is based on manual palpation and therefore relies largely on the practitioner's subjective technical skills and judgment. Consequently, it lacks reliability and consistency, which limits practical applications in clinical medicine. Thus, quantifiable characterization of the wrist pulse diagnosis method is a prerequisite for its further development and widespread use. This paper reports application of a noninvasive CCD sensor-based hybrid measurement system for radial pulse signal analysis. First, artery wall deformations caused by the blood flow are calibrated with a laser triangulation displacement sensor, following by the measurement of the deformations with projection moiré method. Different input pressures and fluids of various viscosities are used in the assembled artificial blood flow system in order to test the performance of laser triangulation technique with detection sensitivity enhancement through microfabricated retroreflective optical element placed on a synthetic vascular graft. Subsequently, the applicability of double-exposure whole-field projection moiré technique for registration of blood flow pulses is considered: a computational model and representative example are provided, followed by in vitro experiment performed on a vascular graft with artificial skin atop, which validates the suitability of the technique for characterization of skin surface deformations caused by the radial pulsation.
NASA Astrophysics Data System (ADS)
Curry, Matthew; England, Troy; Wendt, Joel; Pluym, Tammy; Lilly, Michael; Carr, Stephen; Carroll, Malcolm
Single-shot readout is a requirement for many implementations of quantum information processing. The single-shot readout fidelity is dependent on the signal-to-noise-ratio (SNR) and bandwidth of the readout detection technique. Several different approaches are being pursued to enhance read-out including RF-reflectometry, RF-transmission, parametric amplification, and transistor-based cryogenic preamplification. The transistor-based cryogenic preamplifier is attractive in part because of the reduced experimental complexity compared with the RF techniques. Here we present single-shot charge readout using a cryogenic Heterojunction-Bipolar-Transistor (HBT) inline with a silicon SET charge-sensor at millikelvin temperatures. For the relevant range of HBT DC-biasing, the current gain is 100 to 2000 and the power dissipation is 50 nW to 5 μW, with the microfabricated SET and discrete HBT in an integrated package mounted to the mixing chamber stage of a dilution refrigerator. We experimentally demonstrate a SNR of up to 10 with a bandwidth of 1 MHz, corresponding to a single-shot time-domain charge-sensitivity of approximately 10-4 e / √Hz. This measured charge-sensitivity is comparable to the values reported using the RF techniques. Sandia National Laboratories is a multi-program laboratory operated by Sandia Corporation, a Lockheed-Martin Company, for the U. S. Department of Energy under Contract No. DE-AC04-94AL85000.
Determinants of Clay and Shale Microfabric Signatures: Processes and Mechanisms
1991-01-01
macroenvironments . The interplay of geological, chemical, and biological processes and mechanisms during transport, deposition, and burial of...and macroenviron - a function of processes and mechanisms, are antecedent to gain- ments. The interplay of geological, chemical, and biological pro
Air-Microfluidics: Creating Small, Low-cost, Portable Air Quality Sensors
Air-microfluidics shows great promise in dramatically reducing the size, cost, and power requirements of future air quality sensors without compromising their accuracy. Microfabrication provides a suite of relatively new tools for the development of micro electro mechanical syste...
Improved Ion-Channel Biosensors
NASA Technical Reports Server (NTRS)
Nadeau, Jay; White, Victor; Dougherty, Dennis; Maurer, Joshua
2004-01-01
An effort is underway to develop improved biosensors of a type based on ion channels in biomimetic membranes. These sensors are microfabricated from silicon and other materials compatible with silicon. As described, these sensors offer a number of advantages over prior sensors of this type.
Three-dimensional printing of freeform helical microstructures: a review.
Farahani, R D; Chizari, K; Therriault, D
2014-09-21
Three-dimensional (3D) printing is a fabrication method that enables creation of structures from digital models. Among the different structures fabricated by 3D printing methods, helical microstructures attracted the attention of the researchers due to their potential in different fields such as MEMS, lab-on-a-chip systems, microelectronics and telecommunications. Here we review different types of 3D printing methods capable of fabricating 3D freeform helical microstructures. The techniques including two more common microfabrication methods (i.e., focused ion beam chemical vapour deposition and microstereolithography) and also five methods based on computer-controlled robotic direct deposition of ink filament (i.e., fused deposition modeling, meniscus-confined electrodeposition, conformal printing on a rotating mandrel, UV-assisted and solvent-cast 3D printings) and their advantages and disadvantages regarding their utilization for the fabrication of helical microstructures are discussed. Focused ion beam chemical vapour deposition and microstereolithography techniques enable the fabrication of very precise shapes with a resolution down to ∼100 nm. However, these techniques may have material constraints (e.g., low viscosity) and/or may need special process conditions (e.g., vacuum chamber) and expensive equipment. The five other techniques based on robotic extrusion of materials through a nozzle are relatively cost-effective, however show lower resolution and less precise features. The popular fused deposition modeling method offers a wide variety of printable materials but the helical microstructures manufactured featured a less precise geometry compared to the other printing methods discussed in this review. The UV-assisted and the solvent-cast 3D printing methods both demonstrated high performance for the printing of 3D freeform structures such as the helix shape. However, the compatible materials used in these methods were limited to UV-curable polymers and polylactic acid (PLA), respectively. Meniscus-confined electrodeposition is a flexible, low cost technique that is capable of fabricating 3D structures both in nano- and microscales including freeform helical microstructures (down to few microns) under room conditions using metals. However, the metals suitable for this technique are limited to those that can be electrochemically deposited with the use of an electrolyte solution. The highest precision on the helix geometry was achieved using the conformal printing on a rotating mandrel. This method offers the lowest shape deformation after printing but requires more tools (e.g., mandrel, motor) and the printed structure must be separated from the mandrel. Helical microstructures made of multifunctional materials (e.g., carbon nanotube nanocomposites, metallic coated polymer template) were used in different technological applications such as strain/load sensors, cell separators and micro-antennas. These innovative 3D microsystems exploiting the unique helix shape demonstrated their potential for better performance and more compact microsystems.
Microenvironmental Stiffness of 3D Polymeric Structures to Study Invasive Rates of Cancer Cells.
Lemma, Enrico Domenico; Spagnolo, Barbara; Rizzi, Francesco; Corvaglia, Stefania; Pisanello, Marco; De Vittorio, Massimo; Pisanello, Ferruccio
2017-11-01
Cells are highly dynamic elements, continuously interacting with the extracellular environment. Mechanical forces sensed and applied by cells are responsible for cellular adhesion, motility, and deformation, and are heavily involved in determining cancer spreading and metastasis formation. Cell/extracellular matrix interactions are commonly analyzed with the use of hydrogels and 3D microfabricated scaffolds. However, currently available techniques have a limited control over the stiffness of microscaffolds and do not allow for separating environmental properties from biological processes in driving cell mechanical behavior, including nuclear deformability and cell invasiveness. Herein, a new approach is presented to study tumor cell invasiveness by exploiting an innovative class of polymeric scaffolds based on two-photon lithography to control the stiffness of deterministic microenvironments in 3D. This is obtained by fine-tuning of the laser power during the lithography, thus locally modifying both structural and mechanical properties in the same fabrication process. Cage-like structures and cylindric stent-like microscaffolds are fabricated with different Young's modulus and stiffness gradients, allowing obtaining new insights on the mechanical interplay between tumor cells and the surrounding environments. In particular, cell invasion is mostly driven by softer architectures, and the introduction of 3D stiffness "weak spots" is shown to boost the rate at which cancer cells invade the scaffolds. The possibility to modulate structural compliance also allowed estimating the force distribution exerted by a single cell on the scaffold, revealing that both pushing and pulling forces are involved in the cell-structure interaction. Overall, exploiting this method to obtain a wide range of 3D architectures with locally engineered stiffness can pave the way for unique applications to study tumor cell dynamics. © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Microfabrication of a gadolinium-derived solid-state sensor for thermal neutrons
Achyuthan, Komandoor E.; Allen, Matthew; Denton, Michele L. B.; Siegal, Michael P.; Manginell, Ronald P.
2017-01-01
Abstract Neutron sensing is critical in civilian and military applications. Conventional neutron sensors are limited by size, weight, cost, portability and helium supply. Here the microfabrication of gadolinium (Gd) conversion material–based heterojunction diodes for detecting thermal neutrons using electrical signals produced by internal conversion electrons (ICEs) is described. Films with negligible stress were produced at the tensile-compressive crossover point, enabling Gd coatings of any desired thickness by controlling the radiofrequency sputtering power and using the zero-point near p(Ar) of 50 mTorr at 100 W. Post-deposition Gd oxidation–induced spallation was eliminated by growing a residual stress-free 50 nm neodymium-doped aluminum cap layer atop Gd. The resultant coatings were stable for at least 6 years, demonstrating excellent stability and product shelf-life. Depositing Gd directly on the diode surface eliminated the air gap, leading to a 200-fold increase in electron capture efficiency and facilitating monolithic microfabrication. The conversion electron spectrum was dominated by ICEs with energies of 72, 132 and 174 keV. Results are reported for neutron reflection and moderation by polyethylene for enhanced sensitivity, and γ- and X-ray elimination for improved specificity. The optimal Gd thickness was 10.4 μm for a 300 μm-thick partially depleted diode of 300 mm2 active surface area. Fast detection (within 10 min) at a neutron source-to-diode distance of 11.7 cm was achieved with this configuration. All ICE energies along with γ-ray and Kα,β X-rays were modeled to emphasize correlations between experiment and theory. Semi-conductor thermal neutron detectors offer advantages for field-sensing of radioactive neutron sources. PMID:28369631
Microfabrication of a gadolinium-derived solid-state sensor for thermal neutrons
DOE Office of Scientific and Technical Information (OSTI.GOV)
Pfeifer, Kent B.; Achyuthan, Komandoor E.; Allen, Matthew
Neutron sensing is critical in civilian and military applications. Conventional neutron sensors are limited by size, weight, cost, portability and helium supply. Here in this study, the microfabrication of gadolinium (Gd) conversion material–based heterojunction diodes for detecting thermal neutrons using electrical signals produced by internal conversion electrons (ICEs) is described. Films with negligible stress were produced at the tensile-compressive crossover point, enabling Gd coatings of any desired thickness by controlling the radiofrequency sputtering power and using the zero-point near p(Ar) of 50 mTorr at 100 W. Post-deposition Gd oxidation–induced spallation was eliminated by growing a residual stress-free 50 nm neodymium-dopedmore » aluminum cap layer atop Gd. The resultant coatings were stable for at least 6 years, demonstrating excellent stability and product shelf-life. Depositing Gd directly on the diode surface eliminated the air gap, leading to a 200-fold increase in electron capture efficiency and facilitating monolithic microfabrication. The conversion electron spectrum was dominated by ICEs with energies of 72, 132 and 174 keV. Results are reported for neutron reflection and moderation by polyethylene for enhanced sensitivity, and γ- and X-ray elimination for improved specificity. The optimal Gd thickness was 10.4 μm for a 300 μm-thick partially depleted diode of 300 mm 2 active surface area. Fast detection (within 10 min) at a neutron source-to-diode distance of 11.7 cm was achieved with this configuration. All ICE energies along with γ-ray and K α,β X-rays were modeled to emphasize correlations between experiment and theory. Semi-conductor thermal neutron detectors offer advantages for field-sensing of radioactive neutron sources.« less
Li, Pan; Yu, Haibo; Liu, Na; Wang, Feifei; Lee, Gwo-Bin; Wang, Yuechao; Liu, Lianqing; Li, Wen Jung
2018-05-23
The development of microengineered hydrogels co-cultured with cells in vitro could advance in vivo bio-systems in both structural complexity and functional hierarchy, which holds great promise for applications in regenerative tissues or organs, drug discovery and screening, and bio-sensors or bio-actuators. Traditional hydrogel microfabrication technologies such as ultraviolet (UV) laser or multiphoton laser stereolithography and three-dimensional (3D) printing systems have advanced the development of 3D hydrogel micro-structures but need either expensive and complex equipment, or harsh material selection with limited photoinitiators. Herein, we propose a simple and flexible hydrogel microfabrication method based on a ubiquitous visible-light projection system combined with a custom-designed photosensitive microfluidic chip, to rapidly (typically several to tens of seconds) fabricate various two-dimensional (2D) hydrogel patterns and 3D hydrogel constructs. A theoretical layer-by-layer model that involves continuous polymerizing-delaminating-polymerizing cycles is presented to explain the polymerization and structural formation mechanism of hydrogels. A large area of hydrogel patterns was efficiently fabricated without the usage of costly laser systems or photoinitiators, i.e., a stereoscopic mesh-like hydrogel network with intersecting hydrogel micro-belts was fabricated via a series of dynamic-changing digital light projections. The pores and gaps of the hydrogel network are tunable, which facilitates the supply of nutrients and discharge of waste in the construction of 3D thick bio-models. Cell co-culture experiments showed the effective regulation of cell spreading by hydrogel scaffolds fabricated by the new method presented here. This visible light enabled hydrogel microfabrication method may provide new prospects for designing cell-based units for advanced biomedical studies, e.g., for 3D bio-models or bio-actuators in the future.
Microfabrication of a gadolinium-derived solid-state sensor for thermal neutrons
Pfeifer, Kent B.; Achyuthan, Komandoor E.; Allen, Matthew; ...
2017-03-25
Neutron sensing is critical in civilian and military applications. Conventional neutron sensors are limited by size, weight, cost, portability and helium supply. Here in this study, the microfabrication of gadolinium (Gd) conversion material–based heterojunction diodes for detecting thermal neutrons using electrical signals produced by internal conversion electrons (ICEs) is described. Films with negligible stress were produced at the tensile-compressive crossover point, enabling Gd coatings of any desired thickness by controlling the radiofrequency sputtering power and using the zero-point near p(Ar) of 50 mTorr at 100 W. Post-deposition Gd oxidation–induced spallation was eliminated by growing a residual stress-free 50 nm neodymium-dopedmore » aluminum cap layer atop Gd. The resultant coatings were stable for at least 6 years, demonstrating excellent stability and product shelf-life. Depositing Gd directly on the diode surface eliminated the air gap, leading to a 200-fold increase in electron capture efficiency and facilitating monolithic microfabrication. The conversion electron spectrum was dominated by ICEs with energies of 72, 132 and 174 keV. Results are reported for neutron reflection and moderation by polyethylene for enhanced sensitivity, and γ- and X-ray elimination for improved specificity. The optimal Gd thickness was 10.4 μm for a 300 μm-thick partially depleted diode of 300 mm 2 active surface area. Fast detection (within 10 min) at a neutron source-to-diode distance of 11.7 cm was achieved with this configuration. All ICE energies along with γ-ray and K α,β X-rays were modeled to emphasize correlations between experiment and theory. Semi-conductor thermal neutron detectors offer advantages for field-sensing of radioactive neutron sources.« less
FAILURE ANALYSIS OF MICROFABRICATED IR-ULTRAMICROELECTRODES IN CHLORIDE MEDIA. (R825511C022)
The perspectives, information and conclusions conveyed in research project abstracts, progress reports, final reports, journal abstracts and journal publications convey the viewpoints of the principal investigator and may not represent the views and policies of ORD and EPA. Concl...
Ultrasmall Microfabricated Laser Cavities
2013-10-23
as 105-106 K/W, where material gain saturates and nonradiative processes overwhelm before the device can go into stimulated emission [17, 90, 96...K. Hwang, D.-S. Song, I.-Y. Han, and Y.-H. Lee, \\Effect of nonradiative recombination on light emitting properties of two dimensional photonic
Encapsulated Ball Bearings for Rotary Micro Machines
2007-01-01
maintaining fabrication simplicity and stability. Although ball bearings have been demonstrated in devices such as linear micromotors [6, 7] and rotary... micromotors [8], they have yet to be integrated into the microfabrication process to fully constrain the dynamic element. In the cases of both Modafe et
Churgin, Matthew A; Jung, Sang-Kyu; Yu, Chih-Chieh; Chen, Xiangmei; Raizen, David M; Fang-Yen, Christopher
2017-01-01
The roundworm C. elegans is a mainstay of aging research due to its short lifespan and easily manipulable genetics. Current, widely used methods for long-term measurement of C. elegans are limited by low throughput and the difficulty of performing longitudinal monitoring of aging phenotypes. Here we describe the WorMotel, a microfabricated device for long-term cultivation and automated longitudinal imaging of large numbers of C. elegans confined to individual wells. Using the WorMotel, we find that short-lived and long-lived strains exhibit patterns of behavioral decline that do not temporally scale between individuals or populations, but rather resemble the shortest and longest lived individuals in a wild type population. We also find that behavioral trajectories of worms subject to oxidative stress resemble trajectories observed during aging. Our method is a powerful and scalable tool for analysis of C. elegans behavior and aging. DOI: http://dx.doi.org/10.7554/eLife.26652.001 PMID:28537553
NASA Astrophysics Data System (ADS)
Delfaus, Stephen; Latuga, Brian M.; Morse, Clinton; McCarney, Evan R.; Rossini, Connie J.; Augustine, Brian H.; Flythe, Michael D.; Rowe, Sean; Baron, Stephen F.; Dennis, Douglas E.
2003-11-01
In-situ atomic force microscopy (AFM) allows for the real-time acquisition and analysis of materials undergoing biological and chemical alterations. A co-polymer blend of poly 3-hydroxybutyrate / poly 3-hydroxyvalerate P(3HB-3HV) were spun-cast onto glass slides to create thin films with film thickness of 40 nm. This polymer is naturally biodegradable by a variety of bacterially produced enzymes. In this study, these materials were degraded by an untyped and concentrated Strptomyces sp. enzyme produced from soil. Using liquid-cell AFM in contact mode, we were able to observe biodegradation uniformly across the surface of the P(3HB-3HV) films beginning within 2 min of introduction of the enzyme. Height standards have been developed using microcontact printing of self assembled monolayers and selective dewetting to produce P(3HB-3HV) structures with dimensions as small as 10 mm. We will discuss the use of microfabricated height standards to measure biodegradation kinetics in these polymers.
Flexible deep brain neural probes based on a parylene tube structure
NASA Astrophysics Data System (ADS)
Zhao, Zhiguo; Kim, Eric; Luo, Hao; Zhang, Jinsheng; Xu, Yong
2018-01-01
Most microfabricated neural probes have limited shank length, which prevents them from reaching many deep brain structures. This paper reports deep brain neural probes with ultra-long penetrating shanks based on a simple but novel parylene tube structure. The mechanical strength of the parylene tube shank is temporarily enhanced during implantation by inserting a metal wire. The metal wire can be removed after implantation, making the implanted probe very flexible and thus minimizing the stress caused by micromotions of brain tissues. Optogenetic stimulation and chemical delivery capabilities can be potentially integrated by taking advantage of the tube structure. Single-shank prototypes with a shank length of 18.2 mm have been developed. The microfabrication process comprises of deep reactive ion etching (DRIE) of silicon, parylene conformal coating/refilling, and XeF2 isotropic silicon etching. In addition to bench-top insertion characterization, the functionality of developed probes has been preliminarily demonstrated by implanting into the amygdala of a rat and recording neural signals.
Microfabricated Gas Sensors Demonstrated in Fire and Emission Applications
NASA Technical Reports Server (NTRS)
Hunter, Gary W.
2003-01-01
A range of microfabricated chemical sensors are being developed to meet the needs of fire detection and emission monitoring in aerospace applications. These sensors have the advantages over traditional technology of minimal size, weight, and power consumption as well as the ability to be placed closer to where the measurements need to be made. Sensor arrays are being developed to address detection needs in environments where multiple species need to be measured. For example, the monitoring of chemical species such as carbon monoxide (CO), carbon dioxide (CO2), hydrocarbons, and other species is important in the detection of fires on airplanes and spacecraft. In contrast, different sensors are necessary for characterizing some aircraft engine designs where the monitoring of nitrogen oxides (NO(x)) and CO is of high interest. Demonstration of both fire and emission microsensor technology was achieved this year in a collaborative effort undertaken by the NASA Glenn Research Center, Case Western Reserve University, and Makel Engineering, Inc.
A picoliter-volume mixer for microfluidic analytical systems.
He, B; Burke, B J; Zhang, X; Zhang, R; Regnier, F E
2001-05-01
Mixing confluent liquid streams is an important, but difficult operation in microfluidic systems. This paper reports the construction and characterization of a 100-pL mixer for liquids transported by electroosmotic flow. Mixing was achieved in a microfabricated device with multiple intersecting channels of varying lengths and a bimodal width distribution. All channels running parallel to the direction of flow were 5 microm in width whereas larger 27-microm-width channels ran back and forth through the parallel channel network at a 45 degrees angle. The channel network composing the mixer was approximately 10 microm deep. It was observed that little mixing of the confluent solvent streams occurred in the 100-microm-wide, 300-microm-long mixer inlet channel where mixing would be achieved almost exclusively by diffusion. In contrast, after passage through the channel network in the approximately 200-microm-length static mixer bed, mixing was complete as determined by confocal microscopy and CCD detection. Theoretical simulations were also performed in an attempt to describe the extent of mixing in microfabricated systems.
Microfabricated adhesive mimicking gecko foot-hair.
Geim, A K; Dubonos, S V; Grigorieva, I V; Novoselov, K S; Zhukov, A A; Shapoval, S Yu
2003-07-01
The amazing climbing ability of geckos has attracted the interest of philosophers and scientists alike for centuries. However, only in the past few years has progress been made in understanding the mechanism behind this ability, which relies on submicrometre keratin hairs covering the soles of geckos. Each hair produces a miniscule force approximately 10(-7) N (due to van der Waals and/or capillary interactions) but millions of hairs acting together create a formidable adhesion of approximately 10 N x cm(-2): sufficient to keep geckos firmly on their feet, even when upside down on a glass ceiling. It is very tempting to create a new type of adhesive by mimicking the gecko mechanism. Here we report on a prototype of such 'gecko tape' made by microfabrication of dense arrays of flexible plastic pillars, the geometry of which is optimized to ensure their collective adhesion. Our approach shows a way to manufacture self-cleaning, re-attachable dry adhesives, although problems related to their durability and mass production are yet to be resolved.
Garcia, E.J.; Sniegowski, J.J.
1997-05-20
A microengine uses two synchronized linear actuators as a power source and converts oscillatory motion from the actuators into rotational motion via direct linkage connection to an output gear or wheel. The microengine provides output in the form of a continuously rotating output gear that is capable of delivering drive torque to a micromechanism. The microengine can be operated at varying speeds and its motion can be reversed. Linear actuators are synchronized in order to provide linear oscillatory motion to the linkage means in the X and Y directions according to a desired position, rotational direction and speed of said mechanical output means. The output gear has gear teeth on its outer perimeter for directly contacting a micromechanism requiring mechanical power. The gear is retained by a retaining means which allows said gear to rotate freely. The microengine is microfabricated of polysilicon on one wafer using surface micromachining batch fabrication. 30 figs.
Evaluation of magnetic resonance imaging issues for implantable microfabricated magnetic actuators.
Lee, Hyowon; Xu, Qing; Shellock, Frank G; Bergsneider, Marvin; Judy, Jack W
2014-02-01
The mechanical robustness of microfabricated torsional magnetic actuators in withstanding the strong static fields (7 T) and time-varying field gradients (17 T/m) produced by an MR system was studied in this investigation. The static and dynamic mechanical characteristics of 30 devices were quantitatively measured before and after exposure to both strong uniform and non-uniform magnetic fields. The results showed no statistically significant change in both the static and dynamic mechanical performance, which mitigate concerns about the mechanical stability of these devices in association with MR systems under the conditions used for this assessment. The MR-induced heating was also measured in a 3-T/128-MHz MR system. The results showed a minimal increase (1.6 °C) in temperature due to the presence of the magnetic microactuator array. Finally, the size of the MR-image artifacts created by the magnetic microdevices were quantified. The signal loss caused by the devices was approximately four times greater than the size of the device.