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Sample records for deposited tin films

  1. Deposition of transparent, conductive tin oxide films on glass using a radio-frequency induction heater

    NASA Astrophysics Data System (ADS)

    Solano, I.; Schwoebel, P. R.

    2009-12-01

    Tin oxide films are often used as transparent, conductive coatings on glass in the scientific research setting. The standard approach of depositing these films in an oven leads to poor visibility of the substrate and thus inhibits the ready formation of uniform, low resistivity films. In this note we describe a simple tin oxide film deposition technique using a radio-frequency induction heater that allows for in situ visualization of the deposition process and resulting film. Uniform films having resistivities as low as 2 mΩ cm with transmittances of approximately 85% in the visible light spectrum were readily deposited.

  2. Fabrication of ion conductive tin oxide-phosphate amorphous thin films by atomic layer deposition

    SciTech Connect

    Park, Suk Won; Jang, Dong Young; Kim, Jun Woo; Shim, Joon Hyung

    2015-07-15

    This work reports the atomic layer deposition (ALD) of tin oxide-phosphate films using tetrakis(dimethylamino)tin and trimethyl phosphate as precursors. The growth rates were 1.23–1.84 Å/cycle depending upon the deposition temperature and precursor combination. The ionic conductivity of the ALD tin oxide-phosphate films was evaluated by cross-plane impedance measurements in the temperature range of 50–300 °C under atmospheric air, with the highest conductivity measured as 1.92 × 10{sup −5} S cm{sup −1} at 300 °C. Furthermore, high-resolution x-ray photoelectron spectroscopy exhibited two O1s peaks that were classified as two subpeaks of hydroxyl ions and oxygen ions, revealing that the quantity of hydroxyl ions in the ALD tin oxide-phosphate films influences their ionic conductivity.

  3. Effect of precursor concentration and bath temperature on the growth of chemical bath deposited tin sulphide thin films

    NASA Astrophysics Data System (ADS)

    Jayasree, Y.; Chalapathi, U.; Uday Bhaskar, P.; Sundara Raja, V.

    2012-01-01

    SnS is a promising candidate for a low-cost, non-toxic solar cell absorber layer. Tin sulphide thin films have been deposited by chemical bath deposition technique from a solution containing stannous chloride, thioacetamide, ammonia and triethanolamine (TEA). The effects of concentration of tin salt, triethanolamine and bath temperature on the growth of tin sulphide films have been investigated in order to optimize the growth conditions to obtain tin monosulphide (SnS) films. SnS films obtained under optimized conditions were found to be polycrystalline in nature with orthorhombic structure. The optical band gap of these films was found to be 1.5 eV.

  4. Structural and optical properties of tin selenide thin films prepared by chemical bath deposition method

    NASA Astrophysics Data System (ADS)

    Solanki, V. R.; Parmar, R. J.; Pathak, R. J.; Parmar, M. D.

    2017-05-01

    Tin selenide (SnSe) is an important IV-VI semiconductor used for various devices like memory switching, photoelectrical cells, holographic recording systems. Chemical bath deposition technique has been used to synthesize tin selenide (SnSe) thin films. The SnSe thin films are deposited on glass substrates in an aqueous alkaline medium using sodium selenosulphate as Se-2 ion source and Tin Chloride as Sn+2 ion source. The SnSe Thin films were characterized to study the structural properties. XRD study confirms the formation of orthorhombic structural. The Prepared samples were investigated for optical characterization by UV-VIS Spectroscopy. The optical band gap was found to be direct, that is equal to 1.73eV.

  5. Transparent and Conductive Cadmium-Tin Oxide Films Deposited by Atom Beam Sputtering

    NASA Astrophysics Data System (ADS)

    Nakazawa, Tatsuo; Ito, Kentaro

    1988-09-01

    Transparent and conductive cadmium-tin oxide films with resistivities of 9× 10-4 Ω cm and transmittance higher than 80% over the visible range were prepared by atom beam sputtering. The structure of the deposited film was amorphous and its composition was highly deficient in CdO compared with Cd2SnO4. This CTO film was used as the window layer of a heterojunction solar cell.

  6. Intrinsic anomalous surface roughening of TiN films deposited by reactive sputtering

    SciTech Connect

    Auger, M. A.; Vazquez, L.; Sanchez, O.; Cuerno, R.; Castro, M.; Jergel, M.

    2006-01-15

    We study surface kinetic roughening of TiN films grown on Si(100) substrates by dc reactive sputtering. The surface morphology of films deposited for different growth times under the same experimental conditions were analyzed by atomic force microscopy. The TiN films exhibit intrinsic anomalous scaling and multiscaling. The film kinetic roughening is characterized by a set of local exponent values {alpha}{sub loc}=1.0 and {beta}{sub loc}=0.39, and global exponent values {alpha}=1.7 and {beta}=0.67, with a coarsening exponent of 1/z=0.39. These properties are correlated to the local height-difference distribution function obeying power-law statistics. We associate this intrinsic anomalous scaling with the instability due to nonlocal shadowing effects that take place during thin-film growth by sputtering.

  7. Single-shot selective laser micromachining of filtered arc deposited TiN films from chromium underlayer

    NASA Astrophysics Data System (ADS)

    Dowling, Andrew J.; Ghantasala, Muralidhar K.; Evans, Peter E.; Hayes, Jason P.; Harvey, Erol C.; Doyle, E. Derry

    2002-11-01

    This paper presents the results on single-shot laser micromachining of filtered arc deposited TiN films and compares the machining characteristics of the films deposited under partially and fully filtered conditions. Machining performance was evaluated in terms of patterning quality and the ability to perform selective removal of top TiN film with minimal interference to an underlying layer. TiN was arc-deposited onto silicon substrate with a chromium layer on the top. These films were analysed for their composition and microstructure using Rutherford Backscattering Spectroscopy (RBS) and Scanning Electron Microscopy (SEM) before and after laser machining. Under single shot conditions the effect of fluence on the machined features has been investigated. The results showed selective removal of TiN films with a single shot from the underlying Cr layer. Further, this work clearly shows a distinction between the laser machining characteristics of the films deposited under different filtering conditions and substrate temperatures.

  8. Pulsed laser deposition of tin oxide thin films for field emission studies

    NASA Astrophysics Data System (ADS)

    Jadhav, H.; Suryawanshi, S.; More, M. A.; Sinha, S.

    2017-10-01

    A comparative study of Pulsed Laser Deposition (PLD) based Tin Oxide (SnO2) thin films deposited at various substrate deposition temperature (Ts) has been performed. Surface morphology of the films was studied by Field Emission Scanning Electron Microscopy (FESEM) and surface composition of the films by X-ray PhotoelectronSpectroscopy (XPS) technique. X-ray diffraction (XRD) technique has been used to investigate crystalline nature of the deposited films. Field Emission (FE) properties of the SnO2 films were measured and a significantly low turn on field (2.1 V/μm) (field necessary to draw an emission current density of 10 μA/cm2) for films deposited at high substrate temperature (700 °C) was observed. Field enhancement factor estimated from FE studies was found to strongly depend on the surface morphology of the films. Overall good field emission current stability was observed for all SnO2 films. Dependence of FE properties on surface morphology, surface composition and deposition environment has been observed and analyzed systematically. Significantly low turn on field with high emission current density and field enhancement factor exhibited by films deposited when substrate was maintained at 700 °C has been mainly correlated to surface morphology and surface composition.

  9. Novel fabrication of an electrochromic antimony-doped tin oxide film using a nanoparticle deposition system

    NASA Astrophysics Data System (ADS)

    Kim, Hyungsub; Park, Yunchan; Choi, Dahyun; Ahn, Sung-Hoon; Lee, Caroline Sunyong

    2016-07-01

    Novel deposition method of Antimony-doped tin oxide (ATO) thin films was introduced using a nanoparticle deposition system (NPDS) to fabricate an electrochromic (EC) device. NPDS is a dry deposition method that simplifies the ATO deposition process by eliminating the need for solvents or binders. In this study, an ATO EC layer was deposited using NPDS. The surface morphology and electrochemical and optical transmittance properties were characterized. The optical transmittance change in the ATO EC device was ∼35% over the wavelength range of 350-800 nm, and the cyclic transmittance was stable. The ATO film deposited using NPDS, exhibited a coloration efficiency of 15.5 cm2 C-1. Therefore, our results suggest that ATO EC devices can be fabricated using a simple, cost-effective NPDS, which allows nanoparticles to be deposited directly without pre- or post-processing.

  10. Ferromagnetism of manganese-doped indium tin oxide films deposited on polyethylene naphthalate substrates

    SciTech Connect

    Nakamura, Toshihiro; Isozaki, Shinichi; Tanabe, Kohei; Tachibana, Kunihide

    2009-04-01

    Mn-doped indium tin oxide (ITO) films were deposited on polyethylene naphthalate (PEN) substrates using radio-frequency magnetron sputtering. The magnetic, electrical, and optical properties of the films deposited on PEN substrates were investigated by comparing with the properties of films grown on glass substrates at the same growth conditions. Thin films on PEN substrates exhibited low electrical resistivity of the order of 10{sup -4} {omega} cm and high optical transmittance between 75% and 90% in the visible region. Ferromagnetic hysteresis loops were observed at room temperature for the samples grown on PEN substrates. Mn-doped ITO films can be one of the most promising candidates of transparent ferromagnetic materials for flexible spintronic devices.

  11. Physical/chemical properties of tin oxide thin film transistors prepared using plasma-enhanced atomic layer deposition

    SciTech Connect

    Lee, Byung Kook; Jung, Eunae; Kim, Seok Hwan; Moon, Dae Chul; Lee, Sun Sook; Park, Bo Keun; Hwang, Jin Ha; Chung, Taek-Mo; Kim, Chang Gyoun; An, Ki-Seok

    2012-10-15

    Thin film transistors (TFTs) with tin oxide films as the channel layer were fabricated by means of plasma enhanced atomic layer deposition (PE-ALD). The as-deposited tin oxide films show n-type conductivity and a nano-crystalline structure of SnO{sub 2}. Notwithstanding the relatively low deposition temperatures of 70, 100, and 130 °C, the bottom gate tin oxide TFTs show an on/off drain current ratio of 10{sup 6} while the device mobility values were increased from 2.31 cm{sup 2}/V s to 6.24 cm{sup 2}/V s upon increasing the deposition temperature of the tin oxide films.

  12. Nanocharacterization of TiN films obtained by Ion Vapor deposition

    NASA Astrophysics Data System (ADS)

    Lara, O. L.; Jerez, A. M.; Morantes, M. L.; Plata, A.; Torres, Y.; Lasprilla, M.; Zhabon, V.

    2011-01-01

    We evaluate and characterize the surface at the nanoscale level and take into account the temperature variation effect in the process of plasma ion deposition for H13 steel samples coated by Titanium Nitride (TiN). The interferometric microscopy and atomic force microscopy (AFM) were used to measure the film to analyze the variation of structural and morphological properties of nanofilms that depend on the temperature of sustrate.

  13. Photoassisted Chemically Deposited Tin Sulfide Thin Films Based on Two Different Chemical Formulations

    NASA Astrophysics Data System (ADS)

    Remadevi, T. L.; Dhanya, A. C.; Deepa, K.

    2014-11-01

    Photoassisted chemical deposition is a customized form of chemical bath deposition where the reaction is carried out in the presence of ultraviolet light. Deposition of tin sulfide films was carried out by this method using two different chemical baths. The as-prepared samples from the acetone bath were crystalline, exhibiting the orthorhombic structure of the Sn2S3 phase, but those from the glacial acetic acid bath were amorphous. The crystallinity of the films was improved on annealing. The deposition rate was found to depend on the pH of the bath and the chemical formulation. Distinct morphology was obtained for as-grown films. The films from the acetone bath were compact with uniform morphology of needle-shaped grains having equal diameters and lengths. The films from the glacial acetic acid bath were similar, with smaller needles. The high absorption coefficients of as-grown and annealed films show their potential application as absorber layers in photovoltaic devices. The refractive index was estimated from the reflectance of the films. The estimated activation energies of the as-prepared films from the acetone and glacial acetic acid baths were 0.4 eV and 0.46 eV, whereas those of the annealed samples were 0.2 eV and 0.44 eV, respectively. The activation energy was found to decrease for annealed films due to a decrease in trap sites.

  14. Sensor activity in pulsed laser deposited and ion implanted tin oxide thin films

    NASA Astrophysics Data System (ADS)

    Lal, Ram; Grover, Rajni; Vispute, R. D.; Viswanathan, R.; Godbole, V. P.; Ogale, S. B.

    In this report we report the effect of microstructural variations on sensing activity of SnO2 thin films. The tin oxide thin films are deposited by using the technique of pulsed laser ablation. The process parameters, i.e. oxygen partial pressure, are varied to obtain films with different stoichiometries and microstructures. Some of these films are bombarded with medium energy (140 keV) argon ions at various dose levels. Structural and compositional variations in the films have been studied by using low angle X-ray diffraction, Moessbauer spectroscopy and in-situ resistivity measurements while optical response has been monitored by using UV-visible spectroscopy. The films synthesized and processed under different conditions have been subjected to examination of gas and humidity sensing behavior.

  15. Adherent TiN films produced by ion beam enhanced deposition at room temperature

    NASA Astrophysics Data System (ADS)

    Kant, R. A.; Sartwell, B. D.; Singer, I. L.; Vardiman, R. G.

    1985-03-01

    This paper describes the preliminary results of an investigation of the influence of ion implantation on the structure and mechanical properties of vapor-deposited thin films which are implanted during nucleation and growth. For these studies, titanium was deposited at room temperature on M50 steel, AISI 52100 steel, and silicon substrates in a chamber backfilled with nitrogen gas to a pressure of 1 × 10 -5 Torr. The films were deposited in 125 or more increments of 0.8 nm each. Between each increment, the film was implanted with 30 keV N 2+. Auger electron spectroscopy revealed that significant reduction of carbon and oxygen occurred in the implanted films and electron microscopy showed the films to be entirely fcc with a lattice constant consistent with that of TiN. The mechanical properties of the films were investigated using scratch tests for adhesion as well as friction and wear analysis. While the unimplanted films failed to adhere, the implanted films remained adherent throughout the tests and exhibited both low friction and low wear.

  16. Cathodic cage plasma deposition of TiN and TiO{sub 2} thin films on silicon substrates

    SciTech Connect

    Sousa, Romulo R. M. de; Sato, Patricia S.; Nascente, Pedro A. P.; Viana, Bartolomeu C.; Alves, Clodomiro; Nishimoto, Akio

    2015-07-15

    Cathodic cage plasma deposition (CCPD) was used for growing titanium nitride (TiN) and titanium dioxide (TiO{sub 2}) thin films on silicon substrates. The main advantages of the CCPD technique are the uniformity, tridimensionality, and high rate of the film deposition that occurs at higher pressures, lower temperatures, and lower treatment times than those used in conventional nitriding treatments. In this work, the influence of the temperature and gas atmosphere upon the characteristics of the deposited films was investigated. The TiN and TiO{sub 2} thin films were characterized by x-ray diffraction, scanning electron microscopy, and Raman spectroscopy to analyze their chemical, structural, and morphological characteristics, and the combination of these results indicates that the low-cost CCPD technique can be used to produce even and highly crystalline TiN and TiO{sub 2} films.

  17. Ionization potentials of transparent conductive indium tin oxide films covered with a single layer of fluorine-doped tin oxide nanoparticles grown by spray pyrolysis deposition

    SciTech Connect

    Fukano, Tatsuo; Motohiro, Tomoyoshi; Ida, Takashi; Hashizume, Hiroo

    2005-04-15

    Indium tin oxide (ITO) films deposited with single layers of monodispersive fluorine-doped tin oxide (FTO) nanoparticles of several nanometers in size were grown on glass substrates by intermittent spray pyrolysis deposition using conventional atomizers. These films have significantly higher ionization potentials than the bare ITO and FTO films grown using the same technique. The ITO films covered with FTO particles of 7 nm in average size show an ionization potential of 5.01 eV, as compared with {approx}4.76 and {approx}4.64 eV in ITO and FTO films, respectively, which decreases as the FTO particle size increases. The ionization potentials are practically invariant against oxidation and reduction treatments, promising a wide application of the films to transparent conducting oxide electrodes in organic electroluminescent devices and light-emitting devices of high efficiencies.

  18. Ultra-low thermal conductivity of nanogranular indium tin oxide films deposited by spray pyrolysis

    NASA Astrophysics Data System (ADS)

    Brinzari, Vladimir I.; Cocemasov, Alexandr I.; Nika, Denis L.; Korotcenkov, Ghenadii S.

    2017-02-01

    The authors have shown that nanogranular indium tin oxide (ITO) films, deposited by spray pyrolysis on a silicon substrate, demonstrate ultralow thermal conductivity κ ˜ 0.84 ± 0.12 Wm-1 K-1 at room temperature. This value is approximately by one order of magnitude lower than that in bulk ITO. The strong drop of thermal conductivity is explained by the nanogranular structure and porosity of ITO films, resulting in enhanced phonon scattering on grain boundaries. The experimental results were interpreted theoretically, employing the Boltzmann transport equation approach for phonon transport and filtering model for electronic transport. The calculated values of thermal conductivity are in reasonable agreement with the experimental findings. The presented results show that ITO films with an optimal nanogranular structure may be prospective for thermoelectric applications.

  19. Indium Tin Oxide-Magnesium Fluoride Co-Deposited Films for Spacecraft Applications

    NASA Technical Reports Server (NTRS)

    Dever, Joycer A.; Rutledge, Sharon K.; Hambourger, Paul D.; Bruckner, Eric; Ferrante, Rhea; Pal, Anna Marie; Mayer, Karen; Pietromica, Anthony J.

    1998-01-01

    Highly transparent coatings with a maximum sheet resistivity between 10(exp 8) and 10(exp 9) ohms/square are desired to prevent charging of solar arrays for low Earth polar orbit and geosynchronous orbit missions. Indium tin oxide (ITO) and magnesium fluoride (MgF2) were ion beam sputter co-deposited onto fused silica substrates and were evaluated for transmittance, sheet resistivity and the effects of simulated space environments including atomic oxygen (AO) and vacuum ultraviolet (VUV) radiation. Optical properties and sheet resistivity as a function of MgF2 content in the films will be presented. Films containing 8.4 wt.% MgF2 were found to be highly transparent and provided sheet resistivity in the required range. These films maintained a high transmittance upon exposure to AO and to VUV radiation, although exposure to AO in the presence of charged species and intense electromagnetic radiation caused significant degradation in film transmittance. Sheet resistivity of the as-fabricated films increased with time in ambient conditions. Vacuum beat treatment following film deposition caused a reduction in sheet resistivity. However, following vacuum heat treatment, sheet resistivity values remained stable during storage in ambient conditions.

  20. Room temperature deposition of crystalline indium tin oxide films by cesium-assisted magnetron sputtering

    NASA Astrophysics Data System (ADS)

    Lee, Deuk Yeon; Baik, Hong-Koo

    2008-08-01

    Indium tin oxide (ITO) films were deposited on a Si (1 0 0) substrate at room temperature by cesium-assisted magnetron sputtering. Including plasma characteristics, the structural, electrical, and optical properties of deposited films were investigated as a function of cesium partial vapor pressure controlled by cesium reservoir temperature. We calculated the cesium coverage on the target surface showing maximum formation efficiency of negative ions by means of the theoretical model. Cesium addition promotes the formation efficiency of negative ions, which plays important role in enhancing the crystallinity of ITO films. In particular, the plasma density was linearly increased with cesium concentrations. The resultant decrease in specific resistivity and increase in transmittance (82% in the visible region) at optimum cesium concentration (4.24 × 10 -4 Ω cm at 80 °C of reservoir temperature) may be due to enhanced crystallinity of ITO films. Excess cesium incorporation into ITO films resulted in amorphization of its microstructure leading to degradation of ITO crystallinity. We discuss the cesium effects based on the growth mechanism of ITO films and the plasma density.

  1. Influence of Deposition Conditions on Fatigue Properties of Martensitic Stainless Steel with Tin Film Coated by Arc Ion Plating Method

    NASA Astrophysics Data System (ADS)

    Fukui, Satoshi; Yonekura, Daisuke; Murakami, Ri-Ichi

    The surface properties like roughness etc. strongly influence the fatigue strength of high-tensile steel. To investigate the effect of surface condition and TiN coating on the fatigue strength of high-strength steel, four-point bending fatigue tests were carried out for martensitic stainless steel with TiN film coated using arc ion plating (AIP) method. This study, using samples that had been polished under several size of grind particle, examines the influence of pre-coating treatment on fatigue properties. A 2-µm-thick TiN film was deposited onto the substrate under three kinds of polishing condition. The difference of the hardness originated in the residual stress or thin deformation layer where the difference of the size of grinding particle of the surface polishing. And it leads the transformation of the interface of the substrate and the TiN film and improves fatigue limit.

  2. Nanostructured as-deposited indium tin oxide thin films for broadband antireflection and light trapping

    NASA Astrophysics Data System (ADS)

    Khan, Imran; Bauch, Martin; Dimopoulos, Theodoros; Dostalek, Jakub

    2017-08-01

    Indium tin oxide (ITO) thin films were sputter-deposited at ambient temperature on a glass-like substrate that was periodically nanostructured by UV nanoimprint lithography. Cross gratings of the corrugated and conformal ITO, with different periods and modulation depths, were tailored to exhibit light trapping or antireflection properties at specific spectral windows by combined optical simulations and experiments. For dense gratings, the light transmission in the 450-850 nm range was enhanced by 8% (absolute) compared to flat ITO films, which is one of the largest performance improvements reported in the literature for nanostructured transparent electrodes. Increasing the grating period shifts the threshold for diffraction coupling to waveguide modes in the visible and near infrared part of the spectrum, resulting in broad light trapping behaviour at wavelengths below this threshold. This work demonstrates a simple processing route at ambient temperature for the fabrication of high-performance transparent electrodes in order to fulfil different device requirements.

  3. Indium tin oxide films deposited by thermionic-enhanced DC magnetron sputtering on unheated polyethylene terephthalate polymer substrate

    SciTech Connect

    Lan, Y.F.; Peng, W.C.; Lo, Y.H.; He, J.L.

    2009-08-05

    Indium tin oxide thin films were deposited onto polyethylene terephthalate substrates via thermionic enhanced DC magnetron sputtering at low substrate temperatures. The structural, optical and electrical properties of these films are methodically investigated. The results show that compared with traditional sputtering, the films deposited with thermionic emission exhibit higher crystallinity, and their optical and electrical properties are also improved. Indium tin oxide films deposited by utilizing thermionic emission exhibit an average visible transmittance of 80% and an electrical resistivity of 4.5 x 10{sup -4} {Omega} cm, while films made without thermionic emission present an average visible transmittance of 74% and an electrical resistivity of 1.7 x 10{sup -3} {Omega} cm.

  4. O2 cluster ion assisted deposition for tin doped indium oxide (ITO) films

    NASA Astrophysics Data System (ADS)

    Matsuo, Jiro; Takaoka, Gikan; Yamada, Isao

    2001-07-01

    B S TO2 Gas Cluster Ion Beam assisted deposition technique has been developed to form ultra high quality tin doped indium-oxide (UHQ-ITO) films. This deposition process uses large cluster ions which can transport thousands of atoms in a ion with very low energy per constituent atom. Interactions between cluster ions and substrate atoms occur in the near-surface region and cluster ions can deposit their energy with a high density in a very localized surface region. The energetic oxygen clusters collapsed at the surface and reacted with the metal atoms and about 10% of them were incorporated, when the kinetic energy of the cluster ion was above 5 keV. Oxidation reaction can be enhanced by energetic cluster ion bombardment which offers a new technique for ion assisted thin film formation. Very smooth, highly transparent (>80 %) and low resistivity films, were obtained by using a 7 keV oxygen cluster ion beam. In order to realize high throughput for industrial application, a Multi-beam Gas Cluster Ion Beam equipment has been newly developed.

  5. Copper-Zinc-Tin-Sulfide Thin Films via Annealing of Ultrasonic Spray Deposited Nanocrystal Coatings.

    PubMed

    Williams, Bryce A; Trejo, Nancy D; Wu, Albert; Holgate, Collin S; Francis, Lorraine F; Aydil, Eray S

    2017-06-07

    Thin polycrystalline films of the solar absorber copper-zinc-tin-sulfide (CZTS) were formed by annealing coatings deposited on molybdenum-coated soda lime glass via ultrasonic spraying of aerosol droplets from colloidal CZTS nanocrystal dispersions. Production of uniform continuous nanocrystal coatings with ultrasonic spraying requires that the evaporation time is longer than the aerosol flight time from the spray nozzle to the substrate such that the aerosol droplets still have low enough viscosity to smooth the impact craters that form on the coating surface. In this work, evaporation was slowed by adding a high boiling point cosolvent, cyclohexanone, to toluene as the dispersing liquid. We analyzed, quantitatively, the effects of the solvent composition on the aerosol and coating drying dynamics using an aerosol evaporation model. Annealing coatings in sulfur vapor converts them into polycrystalline films with micrometer size grains, but the grains form continuous films only when Na is present during annealing to enhance grain growth. Continuous films are easier to form when the average nanocrystal size is 15 nm: using larger nanocrystals (e.g., 20 nm) sacrifices film continuity.

  6. Aqueous phase deposition of dense tin oxide films with nano-structured surfaces

    SciTech Connect

    Masuda, Yoshitake Ohji, Tatsuki; Kato, Kazumi

    2014-06-01

    Dense tin oxide films were successfully fabricated in an aqueous solution. The pH of the solutions was controlled to pH 1.3 by addition of HCl. Precise control of solution condition and crystal growth allowed us to obtain dense tin oxide films. Concave–convex surface of fluorine-doped tin oxide (FTO) substrates was entirely-covered with the continuous films. The films were about 65 nm in thickness and had nano-structured surfaces. Morphology of the films was strikingly different from our previous reported nano-sheet assembled structures. The films were not removed from the substrates by strong water flow or air blow to show strong adhesion strength. The aqueous solution process can be applied to surface coating of various materials such as nano/micro-structured surfaces, particles, fibers, polymers, metals or biomaterials. - Graphical abstract: Dense tin oxide films of 65 nm were successfully fabricated in an aqueous solution. They had nano-structured surfaces. Concave-convex substrates were entirely-covered with the continuous films. - Highlights: • Dense tin oxide films of 65 nm were successfully fabricated in an aqueous solution. • They had nano-structured surfaces. • Concave–convex substrates were entirely-covered with the continuous films.

  7. Holographic grating formation in laser-deposited aluminium-doped zinc oxide and indium tin oxide films

    NASA Astrophysics Data System (ADS)

    Thestrup, Birgitte; Dam-Hansen, Carsten; Schou, Jørgen; Johansen, Per Michael

    2000-05-01

    Holographic grating formation is demonstrated in films of the transparent and semiconducting materials aluminium-doped zinc oxide (AZO) and indium tin oxide (ITO) produced by pulsed laser deposition. The holographic gratings are induced by UV laser light at 356 nm. The physics and characteristics of grating formation in laser-deposited AZO and ITO films are compared with those of sputter-deposited indium oxide and ITO films, which have been previously used as holographic recorders. It is found that the optical response of laser-deposited AZO films are superior to that of ITO films. The AZO films exhibited an average transmission in the visible wavelength range of over 90%, and grating diffraction efficiencies of 3 × 10-6 in 200 nm thick films.

  8. Textured fluorine-doped tin dioxide films formed by chemical vapour deposition.

    PubMed

    Bhachu, Davinder S; Waugh, Mathew R; Zeissler, Katharina; Branford, Will R; Parkin, Ivan P

    2011-10-04

    The use of an aerosol delivery system enabled fluorine-doped tin dioxide films to be formed from monobutyltin trichloride methanolic solutions at 350-550 °C with enhanced functional properties compared with commercial standards. It was noted that small aerosol droplets (0.3 μm) gave films with better figures of merit than larger aerosol droplets (45 μm) or use of a similar precursor set using atmospheric pressure chemical vapour deposition (CVD) conditions. Control over the surface texturing and physical properties of the thin films were investigated by variation in the deposition temperature and dopant concentration. Optimum deposition conditions for low-emissivity coatings were found to be at a substrate temperature of about 450 °C with a dopant concentration of 1.6 atm% (30 mol% F:Sn in solution), which resulted in films with a low visible light haze value (1.74%), a high charge-carrier mobility (25 cm(2) V s(-1)) and a high charge-carrier density (5.7×10(20) cm(-3)) resulting in a high transmittance across the visible (≈80%), a high reflectance in the IR (80% at 2500 nm) and plasma-edge onset at 1400 nm. Optimum deposition conditions for coatings with applications as top electrodes in thin film photovoltaics were found to be a substrate temperature of about 500 °C with a dopant concentration of 2.2 atm% (30 mol% F:Sn in solution), which resulted in films with a low sheet resistance (3 Ω sq(-1)), high charge-carrier density (6.4×10(20) cm(-3)), a plasma edge onset of 1440 nm and the films also showed pyramidal surface texturing on the micrometer scale which corresponded to a high visible light haze value (8%) for light scattering and trapping within thin film photovoltaic devices. Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  9. Characterization and Electrochemical Performance at High Discharge Rates of Tin Dioxide Thin Films Synthesized by Atomic Layer Deposition

    NASA Astrophysics Data System (ADS)

    Maximov, M. Yu.; Novikov, P. A.; Nazarov, D. V.; Rymyantsev, A. M.; Silin, A. O.; Zhang, Y.; Popovich, A. A.

    2017-07-01

    In this study, thin films of tin dioxide have been synthesized on substrates of silicon and stainless steel by atomic layer deposition (ALD) with tetraethyl tin and by inductively coupled remote oxygen plasma as precursors. Studies of the surface morphology by scanning electron microscopy show a strong dependence on synthesis temperature. According to the x-ray photoelectron spectroscopy measurements, the samples contain tin in the oxidation state +4. The thickness of the thin films for electrochemical performance was approximately 80 nm. Electrochemical cycling in the voltage range of 0.01-0.8 V have shown that tin oxide has a stable discharge capacity of approximately 650 mAh/g during 400 charge/discharge cycles with an efficiency of approximately 99.5%. The decrease in capacity after 400 charge/discharge cycles was around 5-7%. Synthesized SnO2 thin films have fast kinetics of lithium ions intercalation and excellent discharge efficiency at high C-rates, up to 40C, with a small decrease in capacity of less than 20%. Specific capacity and cyclic stability of thin films of SnO2 synthesized by ALD exceed the values mentioned in the literature for pure tin dioxide thin films.

  10. Structural and optical properties of tin (II) sulfide thin films deposited using organophosphorus precursor (Ph3PS)

    NASA Astrophysics Data System (ADS)

    Assili, Kawther; Alouani, Khaled; Vilanova, Xavier

    2017-02-01

    Tin sulfide (SnS) thin films have been deposited onto glass substrates using triphenylphosphine sulfide (Ph3PS) as a sulfur precursor in a chemical vapor deposition reactor in a temperature range of 250 °C-400 °C. The influence of the sulphidisation temperature in the crystal structure, surface morphology, chemical composition and optical properties has been investigated. X-ray diffraction, energy dispersive analysis of x-rays, and Raman spectroscopy showed that pure SnS thin films have been successfully obtained at 250 °C. All the deposited films were polycrystalline and showed orthorhombic structure, with a preferential orientation according to the direction <111>. The optical measurements showed that the films deposited exhibited a direct allowed transition and have a relatively high absorption coefficient. The presence of mixed tin sulfide phases granted by the variation of the sulphidisation temperature has affected the optical properties of the deposited films. The refractive index (n) and extinction coefficient (k), has low values compared to conventional semiconductor materials. The grown films can be considered as a good light absorbing material and a promising candidate for application in optoelectronic devices.

  11. Electrical and Structural Properties of Tin-Doped Indium Oxide Films Deposited by DC Sputtering at Room Temperature

    NASA Astrophysics Data System (ADS)

    Song, Pung; Shigesato, Yuzo; Kamei, Masayuki; Yasui, Itaru

    1999-05-01

    Tin-doped indium oxide (ITO) films were deposited on soda-lime glass plates without substrate heating by dc magnetron sputtering. Crystallinity and electrical properties of the films were investigated by X-ray diffraction and Hall-effect measurements, which showed clear dependence on target substrate distance (T S) and on total gas pressure (Ptot) during deposition. Degradation in crystallinity was observed at relatively high or low Ptot, where the upper or lower Ptot level for depositing films with high crystallinity was increased with decreasing T S. Based on a hard sphere collision model, the crystallinity of the films was considered to be strongly affected both by the kinetic energy of sputtered In (or Sn) particles and by the bombardment of high energy particles arriving at the growing film surface. The former could enhance the crystallinity, whereas the latter degraded both the crystallinity and conductivity. Such degradation in electrical properties was mainly due to a decrease in carrier density.

  12. Correction: Enhanced photoelectrochemical water oxidation via atomic layer deposition of TiO2 on fluorine-doped tin oxide nanoparticle films

    NASA Astrophysics Data System (ADS)

    Cordova, Isvar A.; Peng, Qing; Ferrall, Isa L.; Rieth, Adam J.; Hoertz, Paul G.; Glass, Jeffrey T.

    2015-07-01

    Correction for `Enhanced photoelectrochemical water oxidation via atomic layer deposition of TiO2 on fluorine-doped tin oxide nanoparticle films' by Isvar A. Cordova, et al., Nanoscale, 2015, 7, 8584-8592.

  13. Correction: Enhanced photoelectrochemical water oxidation via atomic layer deposition of TiO2 on fluorine-doped tin oxide nanoparticle films.

    PubMed

    Cordova, Isvar A; Peng, Qing; Ferrall, Isa L; Rieth, Adam J; Hoertz, Paul G; Glass, Jeffrey T

    2015-07-28

    Correction for 'Enhanced photoelectrochemical water oxidation via atomic layer deposition of TiO2 on fluorine-doped tin oxide nanoparticle films' by Isvar A. Cordova, et al., Nanoscale, 2015, 7, 8584-8592.

  14. Effect of heat treatment on the NO2-sensing properties of sputter-deposited indium tin oxide thin films

    NASA Astrophysics Data System (ADS)

    Vijayalakshmi, K.; Pillay, Vasanthi V.

    2011-10-01

    Transparent conducting indium tin oxide (ITO) films were deposited onto glass substrates by radio-frequency magnetron sputtering at 648 K, under an oxygen partial pressure of 1 Pa. The effect of annealing on the electrical properties of the films was studied. Characterization of the coatings revealed an electrical resistivity below 6.5 × 10- 3 Ω cm. The ITO films deposited at 648 K were amorphous, while the crystallinity improved after annealing at 700 K. The surface morphology examined by scanning electron microscopy appears to be uniform over the entire surface area after annealing. The NO2-sensing properties of the ITO films were investigated and showed sensitivity at concentrations lower than 50 ppm, at a working temperature of 600 K.

  15. Effect of oxygen content on piezoresistivity of indium tin oxide thin films prepared by pulsed laser deposition

    SciTech Connect

    Fang, H.; Miller, T.; Rogers, B.R.; Magruder, R.H. III; Weller, R.A.

    2005-04-15

    The piezoresistivity of thin films of indium tin oxide prepared by pulsed laser deposition has been measured as a function of the O-to-(In+Sn) atom ratio. The oxygen-to-metal atom ratio was determined through Rutherford backscattering spectrometry and x-ray photoelectron spectroscopy analyses. Gauge factors, defined as the fractional change of the film resistance to the applied strain, increase with the film's oxygen content. The deposition under 50 mTorr oxygen pressure resulted in the film with the largest oxygen-to-metal atom ratio, 1.92, and a gauge factor of -14.5. A model based on hopping conduction is proposed. Results from this model are consistent with the sign and magnitude of the observed gauge factors.

  16. Investigation of Tin (Sn) Film Using an Aerosol Jet Additive Manufacturing Deposition Process

    NASA Astrophysics Data System (ADS)

    Fortier, Aleksandra; Liu, Yue; Ghamarian, Iman; Collins, Peter C.; Chason, Eric

    2017-08-01

    The quality of a Sn film deposited by the aerosol process is compared against the quality of Sn films deposited with traditional electroplating. Using the aerosol additive deposition technique, a Sn film was deposited on a brass substrate and exposed to room (25°C) temperature environments for 30 days, followed by a laser photosintering process. The film characteristics and content, formation of intermetallic compounds, residual stress distribution, grain texture, and the tendency of the film to grow Sn whiskers were analyzed. The preliminary results show a successful deposition of Sn film with an aerosol jet process and tensile residual stresses, whereas it was compressive in nature for electroplated Sn film. X-ray diffraction results also show the absence of intermetallic compound (IMC) formation in the aerosol jet-deposited film, while electroplated Sn film has a significant presence of IMC. The aerosol jet-deposited Sn film has the potential to resist nucleation of Sn whiskers under the operating conditions used in this study.

  17. Control of Phase, Structural and Optical Properties of Tin Sulfide Nanostructured Thin Films Grown via Chemical Bath Deposition

    NASA Astrophysics Data System (ADS)

    Mahdi, Mohamed S.; Ibrahim, K.; Hmood, Arshad; Ahmed, Naser M.; Mustafa, Falah I.

    2017-02-01

    In this study, nanostructured tin sulfide (SnS) thin films were synthesized on glass substrates by means of low-cost chemical bath deposition using non-toxic trisodium citrate (TSC) as complexing agent. The influence of varying molar concentration of TSC (0.15-0.21 M) on the tin sulfide phases was investigated. The structural, morphological and optical properties of the films were studied using x-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), Raman spectroscopy and optical absorption spectroscopy. The XRD patterns confirmed an orthorhombic polycrystalline structure of the as-prepared SnS thin films. The values of average crystalline size and texture coefficient of the major XRD peak increased with increasing TSC concentration. The FESEM micrographs revealed that the synthesized thin films are characterized by a flake-stack structure. The Raman spectra of the films showed the presence of a Sn2S3 peak, which gradually declined in intensity until almost disappearing as the TSC concentration increased from 0.15 M to 0.21 M. The direct energy band gaps estimated from ultraviolet-visible-near-infrared absorption spectra also varied between 1.64 eV to 1.1 eV with increasing TSC concentration from 0.15 M to 0.21 M. The results indicate the crucial role of TSC in the synthesis of SnS nanostructured thin films.

  18. Control of Phase, Structural and Optical Properties of Tin Sulfide Nanostructured Thin Films Grown via Chemical Bath Deposition

    NASA Astrophysics Data System (ADS)

    Mahdi, Mohamed S.; Ibrahim, K.; Hmood, Arshad; Ahmed, Naser M.; Mustafa, Falah I.

    2017-07-01

    In this study, nanostructured tin sulfide (SnS) thin films were synthesized on glass substrates by means of low-cost chemical bath deposition using non-toxic trisodium citrate (TSC) as complexing agent. The influence of varying molar concentration of TSC (0.15-0.21 M) on the tin sulfide phases was investigated. The structural, morphological and optical properties of the films were studied using x-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), Raman spectroscopy and optical absorption spectroscopy. The XRD patterns confirmed an orthorhombic polycrystalline structure of the as-prepared SnS thin films. The values of average crystalline size and texture coefficient of the major XRD peak increased with increasing TSC concentration. The FESEM micrographs revealed that the synthesized thin films are characterized by a flake-stack structure. The Raman spectra of the films showed the presence of a Sn2S3 peak, which gradually declined in intensity until almost disappearing as the TSC concentration increased from 0.15 M to 0.21 M. The direct energy band gaps estimated from ultraviolet-visible-near-infrared absorption spectra also varied between 1.64 eV to 1.1 eV with increasing TSC concentration from 0.15 M to 0.21 M. The results indicate the crucial role of TSC in the synthesis of SnS nanostructured thin films.

  19. Control of Phase in Tin Sulfide Thin Films Produced via RF-Sputtering of SnS2 Target with Post-deposition Annealing

    NASA Astrophysics Data System (ADS)

    Banai, R. E.; Cordell, J. C.; Lindwall, G.; Tanen, N. J.; Shang, S.-L.; Nasr, J. R.; Liu, Z.-K.; Brownson, J. R. S.; Horn, M. W.

    2016-01-01

    Tin (II) Monosulfide (SnS) has become an interesting new material for thin film photovoltaics. SnS-based devices have achieved limited success in improved solar cell efficiency. While annealing is a typical post-deposition treatment used to improve thin film quality, sulfur volatility is an issue, despite strong Sn-S bonds in tin sulfide compounds. Annealing of sulfur-rich sputtered tin sulfide thin films in a vacuum environment has not been previously reported. In the present work, we investigated the optoelectronic properties, crystallographic phase, and morphology of annealed, sputtered tin sulfide thin films. Specifically, we studied the phase change and improvement in material quality as a result of post-deposition heat treatments. Tin sulfide thin films were sputtered with and without substrate heating. These samples were then annealed between 300°C and 500°C under moderate vacuum (<1 × 10-4 Pa) in the deposition chamber to find the optimal annealing process for producing α-SnS. Significantly improved crystallinity and morphology were seen in sulfur-rich thin films annealed at 400-500°C for 60 min. Annealed films had resistivity in the range of 30-300 Ω-cm. Experimental observations were confirmed by calculated phase diagrams, which show that annealing around 400°C at low pressure is optimal to obtain a phase-pure α-SnS film from an amorphous SnS2 film.

  20. Smart Windows, Switchable between Transparent, Mirror, and Black States, Fabricated Using Rough and Smooth Indium Tin Oxide Films Deposited by Spray Chemical Vapor Deposition

    NASA Astrophysics Data System (ADS)

    Onodera, Ryou; Seki, Yoshiyuki; Seki, Shigeyuki; Yamada, Katsumi; Sawada, Yutaka; Uchida, Takayuki

    2013-02-01

    Two types of indium-tin oxide films, rough and smooth, with an average grain size of 434 and 71 nm, respectively, were deposited by spray pyrolysis chemical vapor deposition. Using both these films, we fabricated glare tunable transparent electrochemical devices exhibiting reversible optical changes between transparent, mirror, and black states, without any treatments. Under zero bias conditions, the transmittance of the transparent state reached 81.1% at 700 nm. With a bias of -2.5 V, the reflectance of the mirror state reached 82.0% at 700 nm. The total transmittances in the mirror and black state amounted to 0.6% in the visible range.

  1. Reaction Mechanisms of the Atomic Layer Deposition of Tin Oxide Thin Films Using Tributyltin Ethoxide and Ozone.

    PubMed

    Nanayakkara, Charith E; Liu, Guo; Vega, Abraham; Dezelah, Charles L; Kanjolia, Ravindra K; Chabal, Yves J

    2017-06-20

    Uniform and conformal deposition of tin oxide thin films is important for several applications in electronics, gas sensing, and transparent conducting electrodes. Thermal atomic layer deposition (ALD) is often best suited for these applications, but its implementation requires a mechanistic understanding of the initial nucleation and subsequent ALD processes. To this end, in situ FTIR and ex situ XPS have been used to explore the ALD of tin oxide films using tributyltin ethoxide and ozone on an OH-terminated, SiO2-passivated Si(111) substrate. Direct chemisorption of tributyltin ethoxide on surface OH groups and clear evidence that subsequent ligand exchange are obtained, providing mechanistic insight. Upon ozone pulse, the butyl groups react with ozone, forming surface carbonate and formate. The subsequent tributyltin ethoxide pulse removes the carbonate and formate features with the appearance of the bands for CH stretching and bending modes of the precursor butyl ligands. This ligand-exchange behavior is repeated for subsequent cycles, as is characteristic of ALD processes, and is clearly observed for deposition temperatures of 200 and 300 °C. On the basis of the in situ vibrational data, a reaction mechanism for the ALD process of tributyltin ethoxide and ozone is presented, whereby ligands are fully eliminated. Complementary ex situ XPS depth profiles confirm that the bulk of the films is carbon-free, that is, formate and carbonate are not incorporated into the film during the deposition process, and that good-quality SnOx films are produced. Furthermore, the process was scaled up in a cross-flow reactor at 225 °C, which allowed the determination of the growth rate (0.62 Å/cycle) and confirmed a self-limiting ALD growth at 225 and 268 °C. An analysis of the temperature-dependence data reveals that growth rate increases linearly between 200 and 300 °C.

  2. Growth mechanism and optical properties of Ti thin films deposited onto fluorine-doped tin oxide glass substrate

    SciTech Connect

    Einollahzadeh-Samadi, Motahareh; Dariani, Reza S.

    2015-03-15

    In this work, a detailed study of the influence of the thickness on the morphological and optical properties of titanium (Ti) thin films deposited onto rough fluorine-doped tin oxide glass by d.c. magnetron sputtering is carried out. The films were characterized by several methods for composition, crystallinity, morphology, and optical properties. Regardless of the deposition time, all the studied Ti films of 400, 1500, 2000, and 2500 nm in thickness were single crystalline in the α-Ti phase and also very similar to each other with respect to composition. Using the atomic force microscopy (AFM) technique, the authors analyzed the roughness evolution of the Ti films characteristics as a function of the film thickness. By applying the dynamic scaling theory to the AFM images, a steady growth roughness exponent α = 0.72 ± 0.02 and a dynamic growth roughness exponent β = 0.22 ± 0.02 were determined. The value of α and β are consistent with nonlinear growth model incorporating random deposition with surface diffusion. Finally, measuring the reflection spectra of the samples by a spectrophotometer in the spectral range of 300–1100 nm allowed us to investigate the optical properties. The authors observed the increments of the reflection of Ti films with thickness, which by employing the effective medium approximation theory showed an increase in thickness followed by an increase in the volume fraction of metal.

  3. The effects of two thick film deposition methods on tin dioxide gas sensor performance.

    PubMed

    Bakrania, Smitesh D; Wooldridge, Margaret S

    2009-01-01

    This work demonstrates the variability in performance between SnO(2) thick film gas sensors prepared using two types of film deposition methods. SnO(2) powders were deposited on sensor platforms with and without the use of binders. Three commonly utilized binder recipes were investigated, and a new binder-less deposition procedure was developed and characterized. The binder recipes yielded sensors with poor film uniformity and poor structural integrity, compared to the binder-less deposition method. Sensor performance at a fixed operating temperature of 330 °C for the different film deposition methods was evaluated by exposure to 500 ppm of the target gas carbon monoxide. A consequence of the poor film structure, large variability and poor signal properties were observed with the sensors fabricated using binders. Specifically, the sensors created using the binder recipes yielded sensor responses that varied widely (e.g., S = 5 - 20), often with hysteresis in the sensor signal. Repeatable and high quality performance was observed for the sensors prepared using the binder-less dispersion-drop method with good sensor response upon exposure to 500 ppm CO (S = 4.0) at an operating temperature of 330 °C, low standard deviation to the sensor response (±0.35) and no signal hysteresis.

  4. The Effects of Two Thick Film Deposition Methods on Tin Dioxide Gas Sensor Performance

    PubMed Central

    Bakrania, Smitesh D.; Wooldridge, Margaret S.

    2009-01-01

    This work demonstrates the variability in performance between SnO2 thick film gas sensors prepared using two types of film deposition methods. SnO2 powders were deposited on sensor platforms with and without the use of binders. Three commonly utilized binder recipes were investigated, and a new binder-less deposition procedure was developed and characterized. The binder recipes yielded sensors with poor film uniformity and poor structural integrity, compared to the binder-less deposition method. Sensor performance at a fixed operating temperature of 330 °C for the different film deposition methods was evaluated by exposure to 500 ppm of the target gas carbon monoxide. A consequence of the poor film structure, large variability and poor signal properties were observed with the sensors fabricated using binders. Specifically, the sensors created using the binder recipes yielded sensor responses that varied widely (e.g., S = 5 – 20), often with hysteresis in the sensor signal. Repeatable and high quality performance was observed for the sensors prepared using the binder-less dispersion-drop method with good sensor response upon exposure to 500 ppm CO (S = 4.0) at an operating temperature of 330 °C, low standard deviation to the sensor response (±0.35) and no signal hysteresis. PMID:22399977

  5. Probe diagnostics of argon-oxygen-tetramethyltin capacitively coupled plasmas for the deposition of tin oxide thin films

    SciTech Connect

    Pulpytel, J.; Morscheidt, W.; Arefi-Khonsari, F.

    2007-04-01

    Langmuir probe measurements in nondepositing and depositing rf capacitively coupled (CCP) plasmas are briefly reviewed and compared to the results obtained in our rf system used for the deposition of tin oxide (SnO{sub 2}) thin films from argon-oxygen-tetamethyltin [Sn(CH{sub 3}){sub 4}] plasmas. Typically in our experimental conditions for tin oxide deposition, values of kT{sub eff}= 1.2-1.5 eV and n{sub e}=3-5x10{sup 9} cm{sup -3} were measured. These values are consistent with those generally reported in other depositing discharges. The shape of the electron energy probability function (EEPF), obtained from the Druyvesteyn procedure, was discussed too. As a consequence of the two electron heating mechanisms in capacitively coupled discharges, that is, ohmic and stochastic heating, the electrons have a bi-Maxwellian EEPF at low pressure (in the range of 10-100 mTorr). Moreover, a deep 'hole' appears in the EEPF at the energy which could correspond to the resonant peak of the vibrational excitation cross section of some molecules which can be present in the discharge, such as N{sub 2}, CH{sub 4}, or CO.

  6. Laser scribing of indium tin oxide (ITO) thin films deposited on various substrates for touch panels

    NASA Astrophysics Data System (ADS)

    Tseng, Shih-Feng; Hsiao, Wen-Tse; Huang, Kuo-Cheng; Chiang, Donyau; Chen, Ming-Fei; Chou, Chang-Pin

    2010-12-01

    In this study, a Nd:YAG laser with wavelength of 1064 nm is used to scribe the indium tin oxide (ITO) thin films coated on three types of substrate materials, i.e. soda-lime glass, polycarbonate (PC), and cyclic-olefin-copolymer (COC) materials with thickness of 20 nm, 30 nm, and 20 nm, respectively. The effect of exposure time adjusted from 10 μs to 100 μs on the ablated mark width, depth, and electrical properties of the scribed film was investigated. The maximum laser power of 2.2 W was used to scribe these thin films. In addition, the surface morphology, surface reaction, surface roughness, optical properties, and electrical conductivity properties were measured by a scanning electron microscope, a three-dimensional confocal laser scanning microscope, an atomic force microscope, and a four-point probe. The measured results of surface morphology show that the residual ITO layer was produced on the scribed path with the laser exposure time at 10 μs and 20 μs. The better edge qualities of the scribed lines can be obtained when the exposure time extends from 30 μs to 60 μs. When the laser exposure time is longer than 60 μs, the partially burned areas of the scribed thin films on PC and COC substrates are observed. Moreover, the isolated line width and resistivity values increase when the laser exposure time increases.

  7. Effect of variation of tin concentration on the properties of Cu2ZnSnS4 thin films deposited using chemical spray pyrolysis

    NASA Astrophysics Data System (ADS)

    Rajeshmon, V. G.; Kuriakose, Abin; Kartha, C. Sudha; Vijayakumar, K. P.

    2013-02-01

    Cu2ZnSnS4 (CZTS) thin films were prepared using chemical spray pyrolysis technique on soda lime glass (SLG) substrates. The effect of tin concentration on the structural, optical and electrical properties was investigated. We deposited films by varying tin concentration from 0.007 M to 0.013 M in steps of 0.0015 M keeping the concentration of copper, zinc and sulphur at 0.02 M, 0.01 M and 0.12 M respectively. It was found that crystallinity of the film increased up to the tin concentration of 0.01 M and then decreases. Band gap of the films steadily decreased from 1.48 to 1.26 eV with increase in tin concentration. All the samples were observed to be p-type by hot probe method. Resistivity of the films increased with increase in tin concentration. In this work we tuned the optoelectronic properties by varying the tin concentration alone and optimized the concentration of tin which yields samples ideal for photovoltaic applications.

  8. Investigation of thermal and hot-wire chemical vapor deposition copper thin films on TiN substrates using CupraSelect as precursor.

    PubMed

    Papadimitropoulos, G; Davazoglou, D

    2011-09-01

    Copper films were deposited on oxidized Si substrates covered with TiN using a novel chemical vapor deposition reactor in which reactions were assisted by a heated tungsten filament (hot-wire CVD, HWCVD). Liquid at room temperature hexafluoroacetylacetonate Cu(I) trimethylvinylsilane (CupraSelect) was directly injected into the reactor with the aid of a direct-liquid injection (DLI) system using N2 as carrier gas. The deposition rates of HWCVD Cu films obtained on TiN covered substrates were found to increase with filament temperature (65 and 170 degrees C were tested). The resistivities of HWCVD Cu films were found to be higher than for thermally grown films due to the possible presence of impurities into the Cu films from the incomplete dissociation of the precursor and W impurities caused by the presence of the filament. For HWCVD films grown at a filament temperature of 170 degrees C, smaller grains are formed than at 65 degrees C as shown from the taken SEM micrographs. XRD diffractograms taken on Cu films deposited on TiN could not reveal the presence of W compounds originating from the filament because the relative peak was masked by the TiN [112] peak.

  9. Nd:YVO4 laser direct ablation of indium tin oxide films deposited on glass and polyethylene terephthalate substrates.

    PubMed

    Wang, Jian-Xun; Kwon, Sang Jik; Han, Jae-Hee; Cho, Eou Sik

    2013-09-01

    A Q-switched diode-pumped neodymium-doped yttrium vanadate (Nd:YVO4, lambda = 1064 nm) laser was applied to obtain the indium tin oxide (ITO) patterns on flexible polyethylene terephthalate (PET) substrate by a direct etching method. After the ITO films were deposited on a soda-lime glass and PET substrate, laser ablations were carried out on the ITO films for various conditions and the laser ablated results on the ITO films were investigated and analyzed considering the effects of substrates on the laser etching. The laser ablated widths on ITO deposited on glass were found to be much narrower than those on ITO deposited on PET substrate, especially, at a higher scanning speed of laser beam such as 1000 mm/s and 2000 mm/s. As the thermal conductivity of glass substrate is about 7.5 times higher than that of PET, more thermal energy would be spread and transferred to lateral direction in the ITO film in case of PET substrate.

  10. Surface hardening of VT-22 alloy by inductively coupled plasma nitriding and magnetron deposition of TiN films

    NASA Astrophysics Data System (ADS)

    Kharkov, Maxim M.; Kaziev, Andrey V.; Tumarkin, Alexander V.; Drobinin, Vyacheslav E.; Stepanova, Tatiana V.; Pisarev, Alexander A.

    2017-01-01

    The surface of VT-22 Russian grade titanium alloy samples was modified by inductively coupled plasma (ICP) nitriding followed by magnetron deposition of TiN coatings. Different operating conditions of ICP nitriding and magnetron deposition were considered. The microhardness depth profiles were measured for samples after nitriding. The performance of TiN coatings was examined with a scratch tester.

  11. Ultra-thin atomic layer deposited TiN films: non-linear I-V behaviour and the importance of surface passivation.

    PubMed

    Van Bui, H; Aarnink, A A I; Kovalgin, A Y; Wolters, R A M

    2011-09-01

    We report the electrical resistivity of atomic layer deposited TiN thin films in the thickness range 2.5-20 nm. The measurements were carried out using the circular transfer length method structures. For the films with thickness in the range of 10-20 nm, the measurements exhibited linear current-voltage (I-V) curves. The sheet resistance R(sh) was determined, and the resistivity was calculated. A value of 120 microohms-cm was obtained for a 20 nm TiN layer. With decreasing film thickness, the resistivity slightly increased and reached 135 microohms-cm for a 10 nm film. However, the measurements on 2.5-5.0 nm thick films revealed non-linear I-V characteristics, implying the dependence of the measured resistance, and therefore the resistivity, of the layers on applied voltage. The influence of the native oxidation due to the exposure of the films to air was taken into account. To fully eliminate this oxidation, a highly-resistive amorphous silicon layer was deposited directly after the ALD of TiN. The electrical measurements on the passivated 2.5- and 3.5 nm TiN layers then exhibited linear I-V characteristics. A resistivity of 400 and 310 microohms-cm was obtained for a 2.5- and 3.5 nm TiN film, respectively.

  12. Fabrication and properties of plasmonic crystalline thin film of titanium nitride (TiN) by pulsed laser deposition with Nd:YAG laser at 355 nm

    NASA Astrophysics Data System (ADS)

    Oshikane, Yasushi

    2016-09-01

    For efficient plasmonic MIM structures in fabrication of optical nano-probe tip for scanning near-field microscope (SNOM), an experimental study of thin film fabrication of titanium nitride (TiN) has been started by pulsed laser deposition (PLD) with 3rd harmonic (355nm) pulses of high-power Nd:YAG laser. Inside a TMP-pumped UHV chamber, a TiN powder sintered body has been irradiated with the UV laser pulses (3.3 nsFWHM, 10Hz, up to 340mJ/ pulse on target) at different intensities and incident angles. The deposited films on glass slide or silicon wafer has been analyzed by X-ray diffractometer (XRD), UV-Vis spectrophotometer, scanning electron microscope (SEM), and X-ray photoelectron spectroscopy (XPS). Previously-reported PLD fabrication experiments for TiN film used a titanium (Ti) target with several gas species including nitrogen. The laser-produced Ti plasma with an appropriate condition had a chemical reaction with nitrogen molecules, and the resultant TiN film was deposited on a substrate. While on the other hand, this study has significant features of (1) PLD target made of crystalline powder sintered body and (2) UV laser pulses having temporally-smoothed gaussian profile by injection-seeding of IR laser diode beam. The very first trial depositions have succeeded to fabricate flat and dense films of a few hundred nm, which were partly covered with debris and cracks. The resultant XRD pattern of film having luster of gold indicated several peaks including 42.6° (200) and 61.8° (220) which correspond to crystal structure of TiN. The electron configuration in the PLDed TiN film is studied using XPS.

  13. Surface modification of cadmium sulfide thin film honey comb nanostructures: Effect of in situ tin doping using chemical bath deposition

    NASA Astrophysics Data System (ADS)

    Wilson, K. C.; Basheer Ahamed, M.

    2016-01-01

    Even though nanostructures possess large surface to volume ratio compared to their thin film counterpart, the complicated procedure that demands for the deposition on a substrate kept them back foot in device fabrication techniques. In this work, a honey comb like cadmium sulfide (CdS) thin films nanostructure are deposited on glass substrates using simple chemical bath deposition technique at 65 °C. Energy band gaps, film thickness and shell size of the honey comb nanostructures are successfully controlled using tin (Sn) doping and number of shells per unit area is found to be maximum for 5% Sn doped (in the reaction mixture) sample. X-ray diffraction and optical absorption analysis showed that cadmium sulfide and cadmium hydroxide coexist in the samples. TEM measurements showed that CdS nanostructures are embedded in cadmium hydroxide just like "plum pudding". Persistent photoconductivity measurements of the samples are also carried out. The decay constants found to be increased with increases in Sn doping.

  14. AES Studies on the Ti/N Compositionally Gradient Film Deposited onto Ti-6Al-4V Alloy by Reactive DC Sputtering

    NASA Astrophysics Data System (ADS)

    Sonoda, Tsutomu; Watazu, Akira; Katou, Kiyotaka; Asahina, Tadashi

    2006-07-01

    Deposition of Ti/N compositionally gradient film onto Ti-6Al-4V alloy substrates was carried out by reactive DC sputtering, not only to improve the blood compatibility of the alloy but also to relax the stress concentrated at the interface between the film and the alloy substrate. The compositional gradient was realized by varying continuously the nitrogen content in Ar-N2 sputter gas during deposition. In Auger electron spectroscopy (AES) analysis, Auger spectra were acquired in the N(E) mode using the beam brightness modulation (BBM) method to overcome the problem of the peak overlap of the principal Auger nitrogen transition peak (N-KLL) with one of titanium peaks (Ti-LMM). The deposited film appeared to be uniform and adhesive. TiN formation at the surface of the film was assumed, because of its yellow gold color and the X-ray diffraction (XRD) pattern for it. Under scanning electron microscopy, it was found that the surface had fine particles dispersed on a smooth accumulated deposit and that this depositing method improved the structural property of the film at the surface. According to AES in-depth profiles, the nitrogen (N) concentration in the film gradually decreased in the depth direction from the surface toward the alloy, confirming that a Ti/N compositionally gradient film had formed on the alloy substrate.

  15. Oxygen-Plasma-Treated Indium-Tin-Oxide Films on Nonalkali Glass Deposited by Super Density Arc Plasma Ion Plating

    NASA Astrophysics Data System (ADS)

    Kim, Soo Young; Hong, Kihyon; Son, Jun Ho; Jung, Gwan Ho; Lee, Jong-Lam; Choi, Kyu Han; Song, Kyu Ho; Ahn, Kyung Chul

    2008-02-01

    The effects of O2 plasma treatment on both the chemical composition and work function of an indium-tin-oxide (ITO) film were investigated. ITO films were deposited on non-alkali glass substrate by super density arc plasma ion plating for application in active-matrix organic light-emitting diodes (OLEDs). The water contact angle decreased from 38 to 11° as the ITO films were treated with O2 plasma for 60 s at a plasma power of 150 W, indicating an increase in the hydrophilicity of the surface. It was found that there were no distinct changes in the microstructure or electrical properties of the ITO films with O2 plasma treatment. Synchrotron radiation photoemission spectroscopy data revealed that O2 plasma treatment decreased the amount of carbon contamination and increased the number of unscreened states of In3+ and (O2)2- peroxo species. This played the role of increasing the work function of the ITO films by 1.7 eV. As a result, the turn-on voltage of the OLED decreased markedly from 24 to 8 V and the maximum luminance value of the OLED increased to 2500 cd/m2.

  16. The effect of laser patterning parameters on fluorine-doped tin oxide films deposited on glass substrates

    NASA Astrophysics Data System (ADS)

    Tseng, Shih-Feng; Hsiao, Wen-Tse; Huang, Kuo-Cheng; Chiang, Donyau

    2011-08-01

    The purpose of this study is to pattern the fluorine-doped tin oxide thin film deposited on the soda-lime glass substrates for touch screen applications by ultraviolet laser. The patterned film structures provide the electrical isolation and prevent the electrical contact from each region for various touch screens. The surface morphology, edge quality, three-dimensional topography, and profile of isolated lines and electrode structures after laser patterning were measured by a confocal laser scanning microscope. Moreover, a four-point probe instrument was used to measure the sheet resistance before and after laser patterning on film surfaces and also to discuss the electrical property at different laser spot overlaps. After laser patterning, a high overlapping area of laser spot was used to pattern the electrode layer on film surfaces that could obtain an excellent machined quality of edge profile. All sheet resistance values of film surfaces near the isolated line edge were larger than the original ones. Moreover, the sheet resistance values increased with increasing laser spot overlapping area.

  17. Formation of polyhedral N/sub 2/ bubbles during reactive sputter deposition of epitaxial TiN(100) films

    SciTech Connect

    Hultman, L.; Sundgren, J.; Greene, J. E.

    1989-07-15

    Cross-sectional transmission electron microscopy has been used to investigate the formation of polyhedral N/sub 2/ bubbles in single-crystal TiN(100). Thin TiN films were deposited on MgO(100) substrates by reactive magnetron sputtering in pure N/sub 2/ atmospheres at growth temperatures /ital T//sub /ital s// between 550 and 800 /degree/C and negative substrate biases /ital V//sub /ital s// between 0 and 500 V resulting in a deposition rate between 0.35 and 0.33 nm s/sup /minus/1/. The energy per incident nitrogen was /similar to//ital eV//sub /ital s///2 and the irradiation fluxes were less than or equal to2.5/times/10/sup 15/ N/sup +//sub 2/ cm/sup /minus/2/ s/sup /minus/1/. Nitrogen bubbles were observed in films grown at 550less than or equal to/ital T//sub /ital s///lt/800 /degree/C with /ital V//sub /ital s///gt/300 V. In as-deposited films grown at /ital T//sub /ital s//=650 /degree/C with /ital V//sub /ital s//=500 V, the bubbles were distributed in two shapes and size distributions. The largest bubbles were orthorhombohedra, i.e., cubes elongated along (100) directions normal to the growth direction, with 5--20 nm faces on /l brace/100/r brace/ planes most of which exhibited /l brace/110/r brace/ and /l brace/111/r brace/ faceting. Small (less than or equal to5 nm) octahedral bubbles with /l brace/111/r brace/ faces were also observed. /ital/ In situ annealing experiments in the transmission electron microscope showed that the bubbles transformed from orthorhombohedra to octahedra at /ital T//sub /ital s//=350 /degree/C and then returned to orthorhombohedral shape with either continued heating to /ital T//sub /ital s//=600 /degree/C or upon cooling to room temperature. Assuming quasiequilibrium conditions, the surface energy ..gamma.. of N/sub 2/ bubbles in TiN was found to be anisotropic and to vary as ..gamma../sub 100//lt//gamma110//lt//gamma111/.

  18. Epitaxial growth of BiFeO3 films on TiN under layers by sputtering deposition

    NASA Astrophysics Data System (ADS)

    Wang, Yue; Li, Tianjun; Wang, Jian; Harumoto, Takashi; Jia, Tingting; Kimura, Hideo; Nakada, Katsuyuki; Nakagawa, Shigeki; Nakamura, Yoshio; Shi, Ji

    2017-05-01

    BiFeO3/TiN/MgO (001) films have been prepared by magneton sputtering, where TiN serves as a conductive under layer. X-ray diffraction profiles and cross-sectional transmission electron microscopy images reveal that not only (001)-epitaxial BiFeO3 films are obtained, but also both tetragonal and rhombohedral phases co-exist in BiFeO3 films. Their crystallographic relationship is shown as following: tetragonal-BiFeO3 (001) [100]//TiN (001) [100]//MgO (001) [100] and rhombohedral-BiFeO3 (001) [100]//TiN (001) [100]//MgO (001) [100]. Besides, an oxidized TiN layer (˜ 20 nm) has also been detected between BiFeO3 and TiN layers and its formation may originate from oxygen inter-diffusion from BiFeO3 layer. Despite of the existence of the oxidized TiN layer, it does not affect the epitaxial growth of BiFeO3 films. On the other hand, the coercivity electric field obtained in ferroelectric loop of BiFeO3 is greatly enhanced to 49 MV/cm due to the existence of oxidized TiN layer.

  19. Structural, chemical and optical properties of cerium dioxide film prepared by atomic layer deposition on TiN and Si substrates

    NASA Astrophysics Data System (ADS)

    Vangelista, S.; Piagge, R.; Ek, S.; Sarnet, T.; Ghidini, G.; Martella, C.; Lamperti, A.

    2017-08-01

    Thin films of cerium dioxide (CeO2) were deposited by atomic layer deposition (ALD) at 250 {\\deg}C on both Si and TiN substrates. The ALD growth produces CeO2 films with polycrystalline cubic phase on both substrates. However, the films show a preferential orientation along <200> crystallographic direction for CeO2/Si or <111> for CeO2/TiN, as revealed by X-ray diffraction. Additionally, CeO2 films differ in interface roughness depending on the substrate. Furthermore, the relative concentration of Ce3+ is 22.0% in CeO2/Si and around 18% in CeO2/TiN, as obtained by X-ray photoelectron spectroscopy (XPS). Such values indicate a ~10% off-stoichiometry and are indicative of the presence of oxygen vacancies in the films. Nonetheless, CeO2 bandgap energy and refractive index at 550 nm are 3.54+/-0.63 eV and 2.3 for CeO2/Si, and 3.63+/-0.18 eV and 2.4 for CeO2/TiN, respectively. Our results extend the knowledge on the structural and chemical properties of ALD-deposited CeO2 either on Si or TiN substrates, underlying films differences and similarities, thus contributing to boost the use of CeO2 through ALD deposition as foreseen in a wide number of applications.

  20. The effects of deposition conditions and annealing temperature on the performance of gallium tin zinc oxide thin film transistors

    NASA Astrophysics Data System (ADS)

    Bradley, Tanina; Iyer, Shanthi; Alston, Robert; Collis, Ward; Lewis, Jay; Cunningham, Garry; Forsythe, Eric

    2013-03-01

    In this work the performance of bottom gate thin film transistors (TFTs) with transparent amorphous gallium tin zinc oxide (GSZO) active layers fabricated by radio frequency sputter deposition using a single GSZO target on SiO2/Si wafers will be presented. Trap density and its energetic distribution, and oxygen chemisorption were found to play a critical role in determining the operational characteristics of the device, all of which can be controlled by the oxygen incorporation and substrate temperature during deposition, along with the post-deposition annealing. In addition device instability, with respect to the electrical stress and optical illumination, can be suppressed by suitably tailoring these parameters. TFTs exhibiting a drain current (ID) of 10-6 A and on/off current ratio (Ion/off ) of 106 was achieved. A stable TFT has been achieved under electrical stress for 2% oxygen flow exhibiting ΔVT as low as ~0.5 V for 3hr stress under a gate bias of 1.2 and 12 V, with good optical stability.

  1. Synthesis, Deposition, and Microstructure Development of Thin Films Formed by Sulfidation and Selenization of Copper Zinc Tin Sulfide Nanocrystals

    NASA Astrophysics Data System (ADS)

    Chernomordik, Boris David

    Significant reduction in greenhouse gas emission and pollution associated with the global power demand can be accomplished by supplying tens-of-terawatts of power with solar cell technologies. No one solar cell material currently on the market is poised to meet this challenge due to issues such as manufacturing cost, material shortage, or material toxicity. For this reason, there is increasing interest in efficient light-absorbing materials that are comprised of abundant and non-toxic elements for thin film solar cell. Among these materials are copper zinc tin sulfide (Cu2ZnSnS4, or CZTS), copper zinc tin selenide (Cu2ZnSnSe4, or CZTSe), and copper zinc tin sulfoselenide alloys [Cu2ZnSn(SxSe1-x )4, or CZTSSe]. Laboratory power conversion efficiencies of CZTSSe-based solar cells have risen to almost 13% in less than three decades of research. Meeting the terawatt challenge will also require low cost fabrication. CZTSSe thin films from annealed colloidal nanocrystal coatings is an example of solution-based methods that can reduce manufacturing costs through advantages such as high throughput, high material utilization, and low capital expenses. The film microstructure and grain size affects the solar cell performance. To realize low cost commercial production and high efficiencies of CZTSSe-based solar cells, it is necessary to understand the fundamental factors that affect crystal growth and microstructure evolution during CZTSSe annealing. Cu2ZnSnS4 (CZTS) nanocrystals were synthesized via thermolysis of single-source cation and sulfur precursors copper, zinc and tin diethyldithiocarbamates. The average nanocrystal size could be tuned between 2 nm and 40 nm, by varying the synthesis temperature between 150 °C and 340 °C. The synthesis is rapid and is completed in less than 10 minutes. Characterization by X-ray diffraction, Raman spectroscopy, transmission electron microscopy and energy dispersive X-ray spectroscopy confirm that the nanocrystals are nominally

  2. Effect of fluorine doping on highly transparent conductive spray deposited nanocrystalline tin oxide thin films

    NASA Astrophysics Data System (ADS)

    Moholkar, A. V.; Pawar, S. M.; Rajpure, K. Y.; Bhosale, C. H.; Kim, J. H.

    2009-09-01

    The undoped and fluorine doped thin films are synthesized by using cost-effective spray pyrolysis technique. The dependence of optical, structural and electrical properties of SnO 2 films, on the concentration of fluorine is reported. Optical absorption, X-ray diffraction, scanning electron microscope (SEM) and Hall effect studies have been performed on SnO 2:F (FTO) films coated on glass substrates. The film thickness varies from 800 to 1572 nm. X-ray diffraction pattern reveals the presence of cassiterite structure with (2 0 0) preferential orientation for FTO films. The crystallite size varies from 35 to 66 nm. SEM and AFM study reveals the surface of FTO to be made of nanocrystalline particles. The electrical study reveals that the films are degenerate and exhibit n-type electrical conductivity. The 20 wt% F doped film has a minimum resistivity of 3.8 × 10 -4 Ω cm, carrier density of 24.9 × 10 20 cm -3 and mobility of 6.59 cm 2 V -1 s -1. The sprayed FTO film having minimum resistance of 3.42 Ω/cm 2, highest figure of merit of 6.18 × 10 -2 Ω -1 at 550 nm and 96% IR reflectivity suggest, these films are useful as conducting layers in electrochromic and photovoltaic devices and also as the passive counter electrode.

  3. Amorphous indium-tin-zinc oxide films deposited by magnetron sputtering with various reactive gases: Spatial distribution of thin film transistor performance

    SciTech Connect

    Jia, Junjun; Torigoshi, Yoshifumi; Shigesato, Yuzo; Kawashima, Emi; Utsuno, Futoshi; Yano, Koki

    2015-01-12

    This work presents the spatial distribution of electrical characteristics of amorphous indium-tin-zinc oxide film (a-ITZO), and how they depend on the magnetron sputtering conditions using O{sub 2}, H{sub 2}O, and N{sub 2}O as the reactive gases. Experimental results show that the electrical properties of the N{sub 2}O incorporated a-ITZO film has a weak dependence on the deposition location, which cannot be explained by the bombardment effect of high energy particles, and may be attributed to the difference in the spatial distribution of both the amount and the activity of the reactive gas reaching the substrate surface. The measurement for the performance of a-ITZO thin film transistor (TFT) also suggests that the electrical performance and device uniformity of a-ITZO TFTs can be improved significantly by the N{sub 2}O introduction into the deposition process, where the field mobility reach to 30.8 cm{sup 2} V{sup –1} s{sup –1}, which is approximately two times higher than that of the amorphous indium-gallium-zinc oxide TFT.

  4. A comparison of ZnO films deposited on indium tin oxide and soda lime glass under identical conditions

    SciTech Connect

    Deka, Angshuman; Nanda, Karuna Kar

    2013-06-15

    ZnO films have been grown via a vapour phase transport (VPT) on soda lime glass (SLG) and indium-tin oxide (ITO) coated glass. ZnO film on ITO had traces of Zn and C which gives them a dark appearance while that appears yellowish-white on SLG. X-ray photoelectron spectroscopy studies confirm the traces of C in the form of C-O. The photoluminescence studies reveal a prominent green luminescence band for ZnO film on ITO.

  5. Titanium implants' surface functionalization by pulsed laser deposition of TiN, ZrC and ZrN hard films

    NASA Astrophysics Data System (ADS)

    Floroian, Laura; Craciun, Doina; Socol, Gabriel; Dorcioman, Gabriela; Socol, Marcela; Badea, Mihaela; Craciun, Valentin

    2017-09-01

    Thin films of TiN, ZrC, and ZrN were deposited at room temperature on highly polished Ti and Si samples using the pulsed laser deposition technique. Grazing incidence X-ray diffraction investigations showed that films were nanocrystalline, with grain sizes from 5 to 12 nm and under compression. Simulations of X-ray reflectivity curves acquired from the samples indicated that the deposited layers were dense and smooth. Electrochemical tests performed in simulated body fluid showed that the deposited coatings significantly improved the corrosion resistance of Ti samples. The comparative study found out that the best sample was ZrN/Ti, its corrosion current after 32 days immersion in simulated body fluids being half of that measured for the bare Ti sample and in the same time almost unchanged from the initial value.

  6. Effect of post-deposition annealing on structure and chemistry of the TiN film/steel substrate interfaces

    SciTech Connect

    Erdemir, A. ); Cheng, C.C. )

    1991-05-01

    This study deals with solid-state phase transformations occurring at interfaces between a TiN film and an AISI M50 steel substrate during postdeposition annealing at 500 and 1000 {degree}C. Cross-sectional transmission electron microscopy (XTEM) was used to investigate the nature of phase transformations at these interfaces. The TiN films were ion plated onto M50 steel with an initial Ti underlayer at 100 {degree}C. XTEM and electron energy loss spectroscopy of the interfaces indicated that the ion-plated Ti underlayers transformed into a TiC phase during annealing at 500 {degree}C and into a Ti(C,N) phase during annealing at 1000 {degree}C. In addition, the density of defects within grains was significantly reduced during annealing and the grains themselves became larger.

  7. Low Temperature Synthesis of Fluorine-Doped Tin Oxide Transparent Conducting Thin Film by Spray Pyrolysis Deposition.

    PubMed

    Ko, Eun-Byul; Choi, Jae-Seok; Jung, Hyunsung; Choi, Sung-Churl; Kim, Chang-Yeoul

    2016-02-01

    Transparent conducting oxide (TCO) is widely used for the application of flat panel display like liquid crystal displays and plasma display panel. It is also applied in the field of touch panel, solar cell electrode, low-emissivity glass, defrost window, and anti-static material. Fluorine-doped tin oxide (FTO) thin films were fabricated by spray pyrolysis of ethanol-added FTO precursor solutions. FTO thin film by spray pyrolysis is very much investigated and normally formed at high temperature, about 500 degrees C. However, these days, flexible electronics draw many attentions in the field of IT industry and the research for flexible transparent conducting thin film is also required. In the industrial field, indium-tin oxide (ITO) film on polymer substrate is widely used for touch panel and displays. In this study, we investigated the possibility of FTO thin film formation at relatively low temperature of 250 degrees C. We found out that the control of volume of input precursor and exhaust gases could make it possible to form FTO thin film with a relatively low electrical resistance, less than 100 Ohm/sq and high optical transmittance about 88%.

  8. Effect of solvent volume on the physical properties of undoped and fluorine doped tin oxide films deposited using a low-cost spray technique

    NASA Astrophysics Data System (ADS)

    Muruganantham, G.; Ravichandran, K.; Saravanakumar, K.; Ravichandran, A. T.; Sakthivel, B.

    2011-12-01

    Undoped and fluorine doped tin oxide films were deposited from starting solutions having different values of solvent volume (10-50 ml) by employing a low cost and simplified spray technique using perfume atomizer. X-ray diffraction studies showed that there was a change in the preferential orientation from (2 1 1) plane to (1 1 0) plane as the volume of the solvent was increased. The sheet resistance ( Rsh) of undoped SnO 2 film was found to be minimum (13.58 KΩ/□) when the solvent volume was lesser (10 ml) and there was a sharp increase in Rsh for higher values of solvent volume. Interestingly, it was observed that while the Rsh increases sharply with the increase in solvent volume for undoped SnO 2 films, it decreases gradually in the case of fluorine doped SnO 2 films. The quantitative analysis of EDAX confirmed that the electrical resistivity of the sprayed tin oxide film was mainly governed by the number of oxygen vacancies and the interstitial incorporation of Sn atoms which in turn was governed by the impinging flux on the hot substrate. The films were found to have good optical characteristics suitable for opto-electronic devices.

  9. Electrochromic characteristics of niobium-doped titanium oxide film on indium tin oxide/glass by liquid phase deposition

    NASA Astrophysics Data System (ADS)

    Lee, Ming-Kwei; Lee, Chia-Jung

    2015-10-01

    Ammonium hexafluorotitanate and boric acid aqueous solutions were used as precursors for the growth of titanium oxide films on indium tin oxide (ITO)/glass substrate. For as-grown titanium oxide film used in an electrochromic device, Li+ ions from electrolyte will be trapped to hydroxyl groups and degrade the electrochromic durability during the cyclic voltammogram characterization. For niobium doped titanium oxide film, lower growth rate from more HF incorporation from the niobium doped solution and rougher surface morphology from the formation of nanocrystals were obtained. However, niobium doping reduces hydroxyl groups and the electrochromic durability is enhanced from 5 × 103 to 1 × 104 times. The transmittance is enhanced from 37 to 51% at the wavelength of 550 nm.

  10. Structural and optical properties of Tin sulphide thin films

    SciTech Connect

    Akkari, A.; Ben Nasr, T.; Kamoun, N.

    2007-09-19

    Tin sulphide SnS thin films were deposited on glass substrates using the chemical bath deposition technique (CBD). By investigating the influence of triethanolamine (TEA) concentration on the properties of deposited films, we obtained the optimum deposition parameter. These films were characterized with X-ray diffraction (XRD), scanning electron microscopy (SEM) analysis and spectrophotometric measurements. The obtained thin films exhibit the orthorhombic structure and the direct band gap energy is found to be about 1.65 eV, for films prepared at TEA concentration films equal to 13.5 M.

  11. Interdependence between stress, preferred orientation, and surface morphology of nanocrystalline TiN thin films deposited by dual ion beam sputtering

    SciTech Connect

    Abadias, G.; Tse, Y.Y.; Guerin, Ph.; Pelosin, V.

    2006-06-01

    To clarify the underlying mechanisms that cause the preferred orientation in TiN films, we investigated the evolution with the thickness of the texture, surface morphology, and residual stress in TiN thin films deposited by dual ion beam sputtering. The films, with thickness h ranging from 50 to 300 nm, were grown on oxidized Si substrates using a primary Ar ion beam accelerated under 1.2 kV and different voltages V{sub a} of the (Ar+N{sub 2}) assistance beam: 25, 50, and 150 V. The influence of temperature was also investigated by varying the substrate temperature T{sub s} (25-300 deg. C) during growth or by performing a postdeposition annealing. X-ray diffraction (XRD) as well as transmission electron microscopy were used to study the microstructure and changes of texture with thickness h, while x-ray reflectivity and atomic force microscopy measurements were performed to determine the surface roughness. Residual stresses were measured by XRD and analyzed using a triaxial stress model. The crystallite group method was used for a strain determination of crystallites having different fiber axis directions, i.e., when a mixed texture exists. The surface roughness is found to increase with V{sub a} and T{sub s} due to the resputtering effect of the film surface. XRD reveals that for a small thickness (h{approx}50 nm) the TiN films exhibit a strong (002) texture independent of V{sub a}. For a larger thickness (100deposition conditions. When a mixed texture exists, the analysis reveals that (111)-oriented grains sustain stresses that are about 20% more compressive than those sustained by (002

  12. Interdependence between stress, preferred orientation, and surface morphology of nanocrystalline TiN thin films deposited by dual ion beam sputtering

    NASA Astrophysics Data System (ADS)

    Abadias, G.; Tse, Y. Y.; Guérin, Ph.; Pelosin, V.

    2006-06-01

    To clarify the underlying mechanisms that cause the preferred orientation in TiN films, we investigated the evolution with the thickness of the texture, surface morphology, and residual stress in TiN thin films deposited by dual ion beam sputtering. The films, with thickness h ranging from 50 to 300 nm, were grown on oxidized Si substrates using a primary Ar ion beam accelerated under 1.2 kV and different voltages Va of the (Ar+N2) assistance beam: 25, 50, and 150 V. The influence of temperature was also investigated by varying the substrate temperature Ts (25-300 °C) during growth or by performing a postdeposition annealing. X-ray diffraction (XRD) as well as transmission electron microscopy were used to study the microstructure and changes of texture with thickness h, while x-ray reflectivity and atomic force microscopy measurements were performed to determine the surface roughness. Residual stresses were measured by XRD and analyzed using a triaxial stress model. The crystallite group method was used for a strain determination of crystallites having different fiber axis directions, i.e., when a mixed texture exists. The surface roughness is found to increase with Va and Ts due to the resputtering effect of the film surface. XRD reveals that for a small thickness (h~50 nm) the TiN films exhibit a strong (002) texture independent of Va. For a larger thickness (100deposition conditions. When a mixed texture exists, the analysis reveals that (111)-oriented grains sustain stresses that are about 20% more compressive than those sustained by (002)-oriented grains. The present results suggest that the change in the

  13. X-ray Photoelectron Spectroscopy Study of Indium Tin Oxide Films Deposited at Various Oxygen Partial Pressures

    NASA Astrophysics Data System (ADS)

    Peng, Shou; Cao, Xin; Pan, Jingong; Wang, Xinwei; Tan, Xuehai; Delahoy, Alan E.; Chin, Ken K.

    2017-02-01

    Here, a systematic experimental study on indium tin oxide (ITO) films is presented to investigate the effects of oxygen partial pressure on the film's electrical properties. The results of Hall measurements show that adding more oxygen in the sputtering gas has negative influences on the electrical conductivity of ITO films. As O2/(O2 + Ar)% in the sputtering gas is increased from 0 to 6.98%, the resistivity of ITO film rises almost exponentially from 7.9 × 10-4 to 4.1 × 10-2 Ω cm, with the carrier density decreasing from 4.8 × 1020 to 5.4 × 1018 cm-3. The origins of these negative effects are discussed with focuses on the concentration of ionized impurities and the scattering of grain barriers. Extensive x-ray photoelectron spectroscopy (XPS) analyses were employed to gain insight into the concentration of ionized impurities, demonstrating a strong correlation between the oxygen vacancy concentration and the carrier density in ITO films as a function of sputtering O2 partial pressure. Other microstructural characterization techniques including x-ray diffraction (XRD), high-magnification scanning electron microscopy (SEM) and scanning transmission electron microscopy (STEM) analyses were used to evaluate the average grain size of ITO films. For ITO films that have carrier density above 1019 cm-3, scattering on grain boundaries and other crystallographic defects show negligible effects on the carrier transport. The results point to the oxygen vacancy concentration that dictates the carrier density and, thus, the resistivity of magnetron-sputtered ITO films.

  14. Influence of Oxygen Concentration on the Performance of Ultra-Thin RF Magnetron Sputter Deposited Indium Tin Oxide Films as a Top Electrode for Photovoltaic Devices.

    PubMed

    Gwamuri, Jephias; Marikkannan, Murugesan; Mayandi, Jeyanthinath; Bowen, Patrick K; Pearce, Joshua M

    2016-01-20

    The opportunity for substantial efficiency enhancements of thin film hydrogenated amorphous silicon (a-Si:H) solar photovoltaic (PV) cells using plasmonic absorbers requires ultra-thin transparent conducting oxide top electrodes with low resistivity and high transmittances in the visible range of the electromagnetic spectrum. Fabricating ultra-thin indium tin oxide (ITO) films (sub-50 nm) using conventional methods has presented a number of challenges; however, a novel method involving chemical shaving of thicker (greater than 80 nm) RF sputter deposited high-quality ITO films has been demonstrated. This study investigates the effect of oxygen concentration on the etch rates of RF sputter deposited ITO films to provide a detailed understanding of the interaction of all critical experimental parameters to help create even thinner layers to allow for more finely tune plasmonic resonances. ITO films were deposited on silicon substrates with a 98-nm, thermally grown oxide using RF magnetron sputtering with oxygen concentrations of 0, 0.4 and 1.0 sccm and annealed at 300 °C air ambient. Then the films were etched using a combination of water and hydrochloric and nitric acids for 1, 3, 5 and 8 min at room temperature. In-between each etching process cycle, the films were characterized by X-ray diffraction, atomic force microscopy, Raman Spectroscopy, 4-point probe (electrical conductivity), and variable angle spectroscopic ellipsometry. All the films were polycrystalline in nature and highly oriented along the (222) reflection. Ultra-thin ITO films with record low resistivity values (as low as 5.83 × 10(-4) Ω·cm) were obtained and high optical transparency is exhibited in the 300-1000 nm wavelength region for all the ITO films. The etch rate, preferred crystal lattice growth plane, d-spacing and lattice distortion were also observed to be highly dependent on the nature of growth environment for RF sputter deposited ITO films. The structural, electrical, and optical

  15. Influence of Oxygen Concentration on the Performance of Ultra-Thin RF Magnetron Sputter Deposited Indium Tin Oxide Films as a Top Electrode for Photovoltaic Devices

    PubMed Central

    Gwamuri, Jephias; Marikkannan, Murugesan; Mayandi, Jeyanthinath; Bowen, Patrick K.; Pearce, Joshua M.

    2016-01-01

    The opportunity for substantial efficiency enhancements of thin film hydrogenated amorphous silicon (a-Si:H) solar photovoltaic (PV) cells using plasmonic absorbers requires ultra-thin transparent conducting oxide top electrodes with low resistivity and high transmittances in the visible range of the electromagnetic spectrum. Fabricating ultra-thin indium tin oxide (ITO) films (sub-50 nm) using conventional methods has presented a number of challenges; however, a novel method involving chemical shaving of thicker (greater than 80 nm) RF sputter deposited high-quality ITO films has been demonstrated. This study investigates the effect of oxygen concentration on the etch rates of RF sputter deposited ITO films to provide a detailed understanding of the interaction of all critical experimental parameters to help create even thinner layers to allow for more finely tune plasmonic resonances. ITO films were deposited on silicon substrates with a 98-nm, thermally grown oxide using RF magnetron sputtering with oxygen concentrations of 0, 0.4 and 1.0 sccm and annealed at 300 °C air ambient. Then the films were etched using a combination of water and hydrochloric and nitric acids for 1, 3, 5 and 8 min at room temperature. In-between each etching process cycle, the films were characterized by X-ray diffraction, atomic force microscopy, Raman Spectroscopy, 4-point probe (electrical conductivity), and variable angle spectroscopic ellipsometry. All the films were polycrystalline in nature and highly oriented along the (222) reflection. Ultra-thin ITO films with record low resistivity values (as low as 5.83 × 10−4 Ω·cm) were obtained and high optical transparency is exhibited in the 300–1000 nm wavelength region for all the ITO films. The etch rate, preferred crystal lattice growth plane, d-spacing and lattice distortion were also observed to be highly dependent on the nature of growth environment for RF sputter deposited ITO films. The structural, electrical, and optical

  16. Patterning of Indium Tin Oxide Films

    NASA Technical Reports Server (NTRS)

    Immer, Christopher

    2008-01-01

    A relatively rapid, economical process has been devised for patterning a thin film of indium tin oxide (ITO) that has been deposited on a polyester film. ITO is a transparent, electrically conductive substance made from a mixture of indium oxide and tin oxide that is commonly used in touch panels, liquid-crystal and plasma display devices, gas sensors, and solar photovoltaic panels. In a typical application, the ITO film must be patterned to form electrodes, current collectors, and the like. Heretofore it has been common practice to pattern an ITO film by means of either a laser ablation process or a photolithography/etching process. The laser ablation process includes the use of expensive equipment to precisely position and focus a laser. The photolithography/etching process is time-consuming. The present process is a variant of the direct toner process an inexpensive but often highly effective process for patterning conductors for printed circuits. Relative to a conventional photolithography/ etching process, this process is simpler, takes less time, and is less expensive. This process involves equipment that costs less than $500 (at 2005 prices) and enables patterning of an ITO film in a process time of less than about a half hour.

  17. Characteristics of Fluorine-doped tin oxide thin films grown by Streaming process for Electrodeless Electrochemical Deposition

    NASA Astrophysics Data System (ADS)

    Yusuf, Gbadebo; Khalilzadeh-Rezaie, Farnood; Cleary, Justin W.; Oladeji, Isaiah O.; Suu, Koukou; Schoenfeld, Winston V.; Peale, Robert E.; Awodugba, Ayodeji O.

    2015-04-01

    This work investigated the characteristics of SnO2: F films grown by Streaming Process for Electrodeless Electrochemical Deposition (SPEED). Stannic chloride (SnCl4) and ammonium fluoride (NH4 F) was dissolved in a mixture of deionized water and organic solvents. The preheated substrate temperature was varied between 450 and 530° C. High quality SnO2: F films were grown at all the substrate temperatures studied. The typical film thickness was 250 nm. XRD shows that the grown films are polycrystalline SnO2 with a tetragonal crystal structure. The average optical transmission of the films was around 93% throughout the wavelength of 400 to 1000 nm. The lowest electrical resistivity achieved was 6 x 10-4 Ω cm. The Hall measurements showed that the film is an n-type semiconductor, with the highest carrier mobility of 8.3 cm2/V.s, and concentration of 1 x 1021 cm-3. The direct band gap was determined to be 4 eV from the transmittance spectrum.

  18. Atomic layer deposition of tin oxide and zinc tin oxide using tetraethyltin and ozone

    SciTech Connect

    Warner, Ellis J.; Gladfelter, Wayne L.; Johnson, Forrest; Campbell, Stephen A.

    2015-03-15

    Silicon or glass substrates exposed to sequential pulses of tetraethyltin (TET) and ozone (O{sub 3}) were coated with thin films of SnO{sub 2}. Self-limiting deposition was found using 8 s pulse times, and a uniform thickness per cycle (TPC) of 0.2 nm/cycle was observed in a small, yet reproducible, temperature window from 290 to 320 °C. The as-deposited, stoichiometric SnO{sub 2} films were amorphous and transparent above 400 nm. Interspersing pulses of diethylzinc and O{sub 3} among the TET:O{sub 3} pulses resulted in deposition of zinc tin oxide films, where the fraction of tin, defined as [at. % Sn/(at. % Sn + at. % Zn)], was controlled by the ratio of TET pulses, specifically n{sub TET}:(n{sub TET} + n{sub DEZ}) where n{sub TET} and n{sub DEZ} are the number of precursor/O{sub 3} subcycles within each atomic layer deposition (ALD) supercycle. Based on film thickness and composition measurements, the TET pulse time required to reach saturation in the TPC of SnO{sub 2} on ZnO surfaces was increased to >30 s. Under these conditions, film stoichiometry as a function of the TET pulse ratio was consistent with the model devised by Elliott and Nilsen. The as-deposited zinc tin oxide (ZTO) films were amorphous and remained so even after annealing at 450 °C in air for 1 h. The optical bandgap of the transparent ZTO films increased as the tin concentration increased. Hall measurements established that the n-type ZTO carrier concentration was 3 × 10{sup 17} and 4 × 10{sup 18} cm{sup −3} for fractional tin concentrations of 0.28 and 0.63, respectively. The carrier mobility decreased as the concentration of tin increased. A broken gap pn junction was fabricated using ALD-deposited ZTO and a sputtered layer of cuprous oxide. The junction demonstrated ohmic behavior and low resistance consistent with similar junctions prepared using sputter-deposited ZTO.

  19. Morphology and structure evolution of tin-doped indium oxide thin films deposited by radio-frequency magnetron sputtering: The role of the sputtering atmosphere

    SciTech Connect

    Nie, Man Mete, Tayfun; Ellmer, Klaus

    2014-04-21

    The microstructure and morphology evolution of tin-doped indium oxide (ITO) thin films deposited by radio-frequency magnetron sputtering in different sputtering atmospheres were investigated by X-ray diffraction, X-ray reflectivity, and atomic force microscopy. The surface roughness w increases with increasing film thickness d{sub f}, and exhibits a power law behavior w ∼ d{sub f}{sup β}. The roughness decreases with increasing O{sub 2} flow, while it increases with increasing H{sub 2} flow. The growth exponent β is found to be 0.35, 0.75, and 0.98 for depositions in Ar/10%O{sub 2}, pure Ar, and Ar/10%H{sub 2} atmospheres, respectively. The correlation length ξ increases with film thickness also with a power law according to ξ ∼ d{sub f}{sup z} with exponents z = 0.36, 0.44, and 0.57 for these three different gas atmospheres, respectively. A combination of local and non-local growth modes in 2 + 1 dimensions is discussed for the ITO growth in this work.

  20. Lithium intercalation in sputter deposited antimony-doped tin oxide thin films: Evidence from electrochemical and optical measurements

    SciTech Connect

    Montero, J. Granqvist, C. G.; Niklasson, G. A.; Guillén, C.; Herrero, J.

    2014-04-21

    Transparent conducting oxides are used as transparent electrical contacts in a variety of applications, including in electrochromic smart windows. In the present work, we performed a study of transparent conducting antimony-doped tin oxide (ATO) thin films by chronopotentiometry in a Li{sup +}-containing electrolyte. The open circuit potential vs. Li was used to investigate ATO band lineups, such as those of the Fermi level and the ionization potential, as well as the dependence of these lineups on the preparation conditions for ATO. Evidence was found for Li{sup +} intercalation when a current pulse was set in a way so as to drive ions from the electrolyte into the ATO lattice. Galvanostatic intermittent titration was then applied to determine the lithium diffusion coefficient within the ATO lattice. The electrochemical density of states of the conducting oxide was studied by means of the transient voltage recorded during the chronopotentiometry experiments. These measurements were possible because, as Li{sup +} intercalation took place, charge compensating electrons filled the lowest part of the conduction band in ATO. Furthermore, the charge insertion modified the optical properties of ATO according to the Drude model.

  1. Lithium intercalation in sputter deposited antimony-doped tin oxide thin films: Evidence from electrochemical and optical measurements

    NASA Astrophysics Data System (ADS)

    Montero, J.; Guillén, C.; Granqvist, C. G.; Herrero, J.; Niklasson, G. A.

    2014-04-01

    Transparent conducting oxides are used as transparent electrical contacts in a variety of applications, including in electrochromic smart windows. In the present work, we performed a study of transparent conducting antimony-doped tin oxide (ATO) thin films by chronopotentiometry in a Li+-containing electrolyte. The open circuit potential vs. Li was used to investigate ATO band lineups, such as those of the Fermi level and the ionization potential, as well as the dependence of these lineups on the preparation conditions for ATO. Evidence was found for Li+ intercalation when a current pulse was set in a way so as to drive ions from the electrolyte into the ATO lattice. Galvanostatic intermittent titration was then applied to determine the lithium diffusion coefficient within the ATO lattice. The electrochemical density of states of the conducting oxide was studied by means of the transient voltage recorded during the chronopotentiometry experiments. These measurements were possible because, as Li+ intercalation took place, charge compensating electrons filled the lowest part of the conduction band in ATO. Furthermore, the charge insertion modified the optical properties of ATO according to the Drude model.

  2. Ovonic type switching in tin selenide thin films

    NASA Technical Reports Server (NTRS)

    Baxter, C. R.; Mclennan, W. D.

    1975-01-01

    Amorphous tin selenide thin films which possess Ovonic type switching properties are fabricated using vacuum deposition techniques. The devices are fabricated in a planar configuration and consist of amorphous tin selenide deposited over silver contacts. Results obtained indicate that Ovonic type memory switching does occur in these films with the energy density required for switching from a high impedance to a low impedance state being dependent on the spacing between the electrodes of the device. There is also a strong implication that the switching is a function of the magnitude of the applied voltage pulse.

  3. Reactive Sputter Deposition of WO3/Ag/WO3 Film for Indium Tin Oxide (ITO)-Free Electrochromic Devices.

    PubMed

    Yin, Yi; Lan, Changyong; Guo, Huayang; Li, Chun

    2016-02-17

    Functioning both as electrochromic (EC) and transparent-conductive (TC) coatings, WO3/Ag/WO3 (WAW) trilayer film shows promising potential application for ITO-free electrochromic devices. Reports on thermal-evaporated WAW films revealed that these bifunctional WAW films have distinct EC characteristics; however, their poor adhesive property leads to rapid degradation of coloring-bleaching cycling. Here, we show that WAW film with improved EC durability can be prepared by reactive sputtering using metal targets. We find that, by introducing an ultrathin tungsten (W) sacrificial layer before the deposition of external WO3, the oxidation of silver, which leads to film insulation and apparent optical haze, can be effectively avoided. We also find that the luminous transmittance and sheet resistance were sensitive to the thicknesses of tungsten and silver layers. The optimized structure for TC coating was obtained to be WO3 (45 nm)/Ag (10 nm)/W (2 nm)/WO3 (45 nm) with a sheet resistance of 16.3 Ω/□ and a luminous transmittance of 73.7%. Such film exhibits compelling EC performance with decent luminous transmittance modulation ΔTlum of 29.5%, fast switching time (6.6 s for coloring and 15.9 s for bleaching time), and long-term cycling stability (2000 cycles) with an applied potential of ±1.2 V. Thicker external WO3 layer (45/10/2/100 nm) leads to larger modulation with maximum ΔTlum of 46.4%, but at the cost of significantly increasing the sheet resistance. The strategy of introducing ultrathin metal sacrificial layer to avoid silver oxidation could be extended to fabricating other oxide-Ag-oxide transparent electrodes via low-cost reactive sputtering.

  4. Electrical and mechanical characterization of chemical vapor deposition of tungsten on sputter-deposited TiN layers

    NASA Astrophysics Data System (ADS)

    Zhang, S.-L.; Palmans, R.; Petersson, C. S.; Maex, K.

    1995-12-01

    Tungsten (W) films are deposited from tungsten hexafluoride on sputter-deposited TiN adhesion layers in a cold-wall chemical vapor deposition reactor. The film resistivity of the W films is found to be thickness dependent. It decreases monotonically with increasing film thickness. Typical resistivity values of 40-nm-thick W films are about 19.3-23.4 μΩ cm, depending on the structure of the underlying TiN layer used. The resistivity of a 980-nm-thick W film is 9.8 μΩ cm. Oxygen and fluorine impurities, as well as structural difference in the W films are found to be the major causes for the resistivity variations. Lowering impurity level and/or increasing W crystallite size can decrease film resistivity. The stress of all the W films is found to be tensile, independent of the structure of the TiN layers. However, the absolute value of the stress is intimately associated with the structure of the TiN layers. The stress values can differ by a factor of more than 2 for the 40-nm-thick W films deposited on the different underlying TiN layers. The amplitude of stress also monotonically decreases with increasing film thickness. Consequently, the difference in stress induced by the difference in the underlying TiN layers gradually disappears as the film thickness increases. A strong correlation between the stress and the film texture is found.

  5. X-ray photoelectron spectroscopy study on the chemistry involved in tin oxide film growth during chemical vapor deposition processes

    SciTech Connect

    Mannie, Gilbere J. A.; Gerritsen, Gijsbert; Abbenhuis, Hendrikus C. L.; Deelen, Joop van; Niemantsverdriet, J. W.; Thuene, Peter C.

    2013-01-15

    The chemistry of atmospheric pressure chemical vapor deposition (APCVD) processes is believed to be complex, and detailed reports on reaction mechanisms are scarce. Here, the authors investigated the reaction mechanism of monobutyl tinchloride (MBTC) and water during SnO{sub 2} thin film growth using x-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM). XPS results indicate an acid-base hydrolysis reaction mechanism, which is tested with multilayer experiments, demonstrating self-terminating growth. In-house developed TEM wafers are used to visualize nucleation during these multilayer experiments, and results are compared with TEM results of APCVD samples. Results show almost identical nucleation behavior implying that their growth mechanism is identical. Our experiments suggest that in APCVD, when using MBTC and water, SnO{sub 2} film growth occurs via a heterolytic bond splitting of the Sn-Cl bonds without the need to invoke gas-phase radical or coordination chemistry of the MBTC precursor.

  6. Effect of sulfurization time on the properties of copper zinc tin sulfide thin films grown by electrochemical deposition.

    PubMed

    Aldalbahi, Ali; Mkawi, E M; Ibrahim, K; Farrukh, M A

    2016-09-07

    We report growth of quaternary Cu2 ZnSnS4 (CZTS) thin films prepared by the electrochemical deposition from salt precursors containing Cu (II), Zn (II) and Sn (IV) metals. The influence of different sulfurization times t (t = 75, 90, 105, and 120 min) on the structural, compositional, morphological, and optical properties, as well as on the electrical properties is studied. The films sulfurized 2 hours showed a prominent kesterite phase with a nearly stoichiometric composition. Samples were characterized by X-ray diffraction (XRD), field-emission scanning electron microscopy (FESEM), and Raman and UV-VIS-NIR spectrometer at different stages of work. X-ray diffraction and Raman spectroscopy analyses confirmed the formation of phase-pure CZTS films. (FESEM) shows that compact and dense morphology and enhanced photo-sensitivity. STEM - EDS elemental map of CZTS cross-section confirms homogeneous distribution. From optical study, energy gap was enlarged with a changed sulfurization times in the range of 1.37-1.47 eV.

  7. Effect of sulfurization time on the properties of copper zinc tin sulfide thin films grown by electrochemical deposition

    PubMed Central

    Aldalbahi, Ali; Mkawi, E. M.; Ibrahim, K.; Farrukh, M. A.

    2016-01-01

    We report growth of quaternary Cu2 ZnSnS4 (CZTS) thin films prepared by the electrochemical deposition from salt precursors containing Cu (II), Zn (II) and Sn (IV) metals. The influence of different sulfurization times t (t = 75, 90, 105, and 120 min) on the structural, compositional, morphological, and optical properties, as well as on the electrical properties is studied. The films sulfurized 2 hours showed a prominent kesterite phase with a nearly stoichiometric composition. Samples were characterized by X-ray diffraction (XRD), field-emission scanning electron microscopy (FESEM), and Raman and UV-VIS-NIR spectrometer at different stages of work. X-ray diffraction and Raman spectroscopy analyses confirmed the formation of phase-pure CZTS films. (FESEM) shows that compact and dense morphology and enhanced photo-sensitivity. STEM - EDS elemental map of CZTS cross-section confirms homogeneous distribution. From optical study, energy gap was enlarged with a changed sulfurization times in the range of 1.37–1.47 eV. PMID:27600023

  8. Effect of sulfurization time on the properties of copper zinc tin sulfide thin films grown by electrochemical deposition

    NASA Astrophysics Data System (ADS)

    Aldalbahi, Ali; Mkawi, E. M.; Ibrahim, K.; Farrukh, M. A.

    2016-09-01

    We report growth of quaternary Cu2 ZnSnS4 (CZTS) thin films prepared by the electrochemical deposition from salt precursors containing Cu (II), Zn (II) and Sn (IV) metals. The influence of different sulfurization times t (t = 75, 90, 105, and 120 min) on the structural, compositional, morphological, and optical properties, as well as on the electrical properties is studied. The films sulfurized 2 hours showed a prominent kesterite phase with a nearly stoichiometric composition. Samples were characterized by X-ray diffraction (XRD), field-emission scanning electron microscopy (FESEM), and Raman and UV-VIS-NIR spectrometer at different stages of work. X-ray diffraction and Raman spectroscopy analyses confirmed the formation of phase-pure CZTS films. (FESEM) shows that compact and dense morphology and enhanced photo-sensitivity. STEM - EDS elemental map of CZTS cross-section confirms homogeneous distribution. From optical study, energy gap was enlarged with a changed sulfurization times in the range of 1.37–1.47 eV.

  9. Synthesis of tin-containing polyimide films

    NASA Technical Reports Server (NTRS)

    Ezzell, S. A.; Taylor, L. T.

    1984-01-01

    A series of tin-containing polyimide films derived from either 3,3',4,4'-benzophenone tetracarboxylic acid dianhydride or pyromellitic dianhydride and 4,4'-oxydianiline have been synthesized and their electrical properties examined. Highest quality materials (i.e., homogeneous, smooth surface, flexible) with the best electrical properties were doped with either SnCl2.2H2O or (n-Bu)2SnCl2. In all cases, extensive reactivity of the tin dopant with water, air or polyamic acid during imidization is observed. Lowered electrical surface resistivities appear to be correlatable with the presence of surface tin oxide on the film surface.

  10. Structural and physical properties of tin oxide thin films for optoelectronic applications

    NASA Astrophysics Data System (ADS)

    Lin, Su-Shia; Tsai, Yung-Shiang; Bai, Kai-Ren

    2016-09-01

    Tin oxide films were deposited on glass substrates by RF magnetron sputtering. At a lower sputtering pressure, the tin oxide film comprised nanocrystalline orthorhombic SnO with a (110) orientation, greater p-type conductivity and better hydrophobicity. Increasing substrate temperature resulted in the coexistence of nanocrystalline orthorhombic SnO and tetragonal SnO2 in the deposited film, favoring hydrophilicity, changing the p-type conductivity to n-type conductivity, and reducing resistivity. As the sputtering pressure or substrate temperature increased, the tin oxide film exhibited a lower surface roughness, a larger optical energy gap, and higher optical transmission.

  11. Influence of the Cation Ratio on Optical and Electrical Properties of Amorphous Zinc-Tin-Oxide Thin Films Grown by Pulsed Laser Deposition.

    PubMed

    Bitter, Sofie; Schlupp, Peter; Bonholzer, Michael; von Wenckstern, Holger; Grundmann, Marius

    2016-04-11

    Continuous composition spread (CCS) methods allow fast and economic exploration of composition dependent properties of multielement compounds. Here, a CCS method was applied for room temperature pulsed laser deposition (PLD) of amorphous zinc-tin-oxide to gain detailed insight into the influence of the zinc-to-tin cation ratio on optical and electrical properties of this ternary compound. Our CCS approach for a large-area offset PLD process utilizes a segmented target and thus makes target exchange or movable masks in the PLD chamber obsolete. Cation concentrations of 0.08-0.82 Zn/(Zn + Sn) were achieved across single 50 × 50 mm(2) glass substrates. The electrical conductivity increases for increasing tin content, and the absorption edge shifts to lower energies. The free carrier concentration can be tuned from 10(20) to 10(16) cm(-3) by variation of the cation ratio from 0.1 to 0.5 Zn/(Zn + Sn).

  12. Low-Temperature Growth of Transparent and Conducting Tin Oxide Film by Photo-Chemical Vapor Deposition

    NASA Astrophysics Data System (ADS)

    Tabuchi, Toshiya; Yamagishi, Koji; Tarui, Yasuo

    1987-03-01

    For the first time, photo-CVD of transparent and conducting SnO2 films has been achieved under irradiation by a low-pressure Hg lamp. It was confirmed that both resonance lines (254 nm, 185 nm) are effective for the activation of CVD-sources (O2, SnCl4, SbCl5). The structural, electrical and optical properties of undoped and Sb-doped SnO2 films prepared by the photo-CVD method were evaluated. Resistivity as low as 5.48× 10-3 ohm\\cdotcm with high optical transmission (80%) was obtained in Sb-doped SnO2 films (80 nm in thickness).

  13. Placer tin deposits in central Alaska

    USGS Publications Warehouse

    Chapman, Robert Mills; Coats, Robert Roy; Payne, Thomas G.

    1963-01-01

    Placer tin, in the form of cassiterite (Sn02) and (or) tinstone (fragments including cassiterite and some vein or rock material), is known or reported in deposits that have been prospected or mined for placer gold in four areas adjacent to the Yukon River in central Alaska, 120 to 240 miles west of Fairbanks. These areas are: the Morelock Creek area, on the north side of the Yukon River about 30 miles upstream from Tanana; the Moran Dome area, about 16 miles north of the Yukon River and 25 miles northwest of Tanana; the Mason Creek area, on the north side of the Yukon River about 36 miles west of Tanana; and the Ruby-Long area, on the south side of the Yukon River near Ruby and about 40 miles east of Galena. The only extensive placer mining in these areas has been in the Ruby-Long area. Other placer deposits including some cassiterite are known in central Alaska but are not discussed in this report. Bedrock in these areas is predominantly schist of various types with some associated greenstone and other metamorphic rocks. Some granite is exposed in the Moran Dome and Ruby-Long areas and in areas close to Morelock and Mason Creeks. Barren, milky quartz veins and veinlets transecting the metamorphic rocks are common. No cassiterite was found in the bedrock, and no bedrock source of the tin has been reported. In the Moran Dome and Mason Creek areas, and in part of the Ruby-Long area, tourmaline is present in the rocks of the tin-bearing drainage basins, and apparently absent elsewhere in these areas. The placer deposits are in both valley floor and bench alluvium, which are predominantly relatively thin, rarely exceeding a thickness of 30 feet. Most of the alluvium deposits are not perennially frozen. In the Morelock Creek area tin-bearing deposits are 5 to 5? miles above the mouth of the creek, and meager evidence indicates that cassiterite and gold are present in Morelock Creek valley and some of the tributaries both upstream and downstream from these deposits. The

  14. Variable temperature semiconductor film deposition

    DOEpatents

    Li, Xiaonan; Sheldon, Peter

    1998-01-01

    A method of depositing a semiconductor material on a substrate. The method sequentially comprises (a) providing the semiconductor material in a depositable state such as a vapor for deposition on the substrate; (b) depositing the semiconductor material on the substrate while heating the substrate to a first temperature sufficient to cause the semiconductor material to form a first film layer having a first grain size; (c) continually depositing the semiconductor material on the substrate while cooling the substrate to a second temperature sufficient to cause the semiconductor material to form a second film layer deposited on the first film layer and having a second grain size smaller than the first grain size; and (d) raising the substrate temperature, while either continuing or not continuing to deposit semiconductor material to form a third film layer, to thereby anneal the film layers into a single layer having favorable efficiency characteristics in photovoltaic applications. A preferred semiconductor material is cadmium telluride deposited on a glass/tin oxide substrate already having thereon a film layer of cadmium sulfide.

  15. Variable temperature semiconductor film deposition

    DOEpatents

    Li, X.; Sheldon, P.

    1998-01-27

    A method of depositing a semiconductor material on a substrate is disclosed. The method sequentially comprises (a) providing the semiconductor material in a depositable state such as a vapor for deposition on the substrate; (b) depositing the semiconductor material on the substrate while heating the substrate to a first temperature sufficient to cause the semiconductor material to form a first film layer having a first grain size; (c) continually depositing the semiconductor material on the substrate while cooling the substrate to a second temperature sufficient to cause the semiconductor material to form a second film layer deposited on the first film layer and having a second grain size smaller than the first grain size; and (d) raising the substrate temperature, while either continuing or not continuing to deposit semiconductor material to form a third film layer, to thereby anneal the film layers into a single layer having favorable efficiency characteristics in photovoltaic applications. A preferred semiconductor material is cadmium telluride deposited on a glass/tin oxide substrate already having thereon a film layer of cadmium sulfide.

  16. Preparation and characterization of high-quality TiN films at low temperature by filtered cathode arc plasma

    SciTech Connect

    Zhang, Y.J.; Yan, P.X.; Wu, Z.G.; Xu, J.W.; Zhang, W.W.; Li, X.; Liu, W.M.; Xue, Q.J.

    2004-11-01

    High-quality TiN films were successfully deposited on silicon and stainless-steel substrates at low temperature using an improved filtered cathode arc plasma technique developed in our lab. Atomic force microscope, x-ray diffractometer, x-ray photoelectron spectroscopy, and a nanoindenter were employed to characterize the TiN thin films. The microhardness of the TiN films have a high value up to 41 GPa, which is far higher than that of TiN compounds deposited by conventional chemical vapor deposition and physical vapor deposition methods (20 Gpa or so). The films are of a stronger preferred crystalline orientation, very smooth surface, and high reflectivity. The effects of the negative substrate bias on the preferred crystalline orientation, surface roughness, deposition rate, and microhardness of Tin thin films are discussed in detail.

  17. Heteroepitaxial growth of TiN film on MgO (100) by reactive magnetron sputtering

    PubMed Central

    2014-01-01

    TiN thin films were deposited on MgO (100) substrates at different substrate temperatures using rf sputtering with Ar/N2 ratio of about 10. At 700°C, the growth rate of TiN was approximately 0.05 μm/h. The structural and electrical properties of TiN thin films were characterized with x-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM), and Hall measurements. For all deposition conditions, XRD results show that the TiN films can be in an epitaxy with MgO with cube-on-cube orientation relationship of (001)TiN // (001)MgO and [100]TiN // [100]MgO. TEM with selected-area electron diffraction pattern verifies the epitaxial growth of the TiN films on MgO. SEM and AFM show that the surface of the TiN film is very smooth with roughness approximately 0.26 nm. The minimum resistivity of the films can be as low as 45 μΩ cm. PMID:25324706

  18. Heteroepitaxial growth of TiN film on MgO (100) by reactive magnetron sputtering.

    PubMed

    Chen, Wei-Chun; Peng, Chun-Yen; Chang, Li

    2014-01-01

    TiN thin films were deposited on MgO (100) substrates at different substrate temperatures using rf sputtering with Ar/N2 ratio of about 10. At 700°C, the growth rate of TiN was approximately 0.05 μm/h. The structural and electrical properties of TiN thin films were characterized with x-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM), and Hall measurements. For all deposition conditions, XRD results show that the TiN films can be in an epitaxy with MgO with cube-on-cube orientation relationship of (001)TiN // (001)MgO and [100]TiN // [100]MgO. TEM with selected-area electron diffraction pattern verifies the epitaxial growth of the TiN films on MgO. SEM and AFM show that the surface of the TiN film is very smooth with roughness approximately 0.26 nm. The minimum resistivity of the films can be as low as 45 μΩ cm.

  19. Ferroelectric and ferromagnetic properties of epitaxial BiFeO{sub 3}-BiMnO{sub 3} films on ion-beam-assisted deposited TiN buffered flexible Hastelloy

    SciTech Connect

    Xiong, J.; Matias, V.; Jia, Q. X.; Tao, B. W.; Li, Y. R.

    2014-05-07

    Growth of multifunctional thin films on flexible substrates is of great technological significance since such a platform is needed for flexible electronics. In this study, we report the growth of biaxially aligned (BiFeO{sub 3}){sub 0.5}:(BiMnO{sub 3}){sub 0.5} [BFO-BMO] films on polycrystalline Hastelloy by using a biaxially aligned TiN as a seed layer deposited by ion-beam-assisted deposited and a La{sub 0.7}Sr{sub 0.3}MnO{sub 3} (LSMO) as a buffer layer deposited by pulsed laser deposition. The LSMO is used not only as a buffer layer but also as the bottom electrode of the BFO-BMO films. X-ray diffraction showed that the BFO-BMO films are biaxially oriented along both in-plane and out-of-plane directions. The BFO-BMO films on flexible metal substrates showed a polarization of 22.9 μC/cm{sup 2}. The magnetization of the BFO-BMO/LSMO is 62 emu/cc at room temperature.

  20. Investigation of electroless tin deposition from acidic thiourea-type bath

    NASA Astrophysics Data System (ADS)

    Araźna, A.; Bieliński, J.

    2006-10-01

    The constant tendency of miniaturization in electronic products and developments in surface assembly techniques creates requirement to prepare new techniques and processes also in the range of metallic coatings. An additional factor which influences the evolution of preservatives coatings technology is the necessity to adapt Polish law to European directive. From 1 st July 2006 there will be an obligatory RoHS directive banning applying lead in electronics. Electroless tin deposition is one of an alternative for Sn/Pb lead free preservative films on copper surface in PCB technology. Electroless deposition of tin coatings on copper can be made in two ways: from an alkaline bath - the process disproportionation of Sn(II) compounds and from acidic bath contain complex compound such as thiourea - the displacement of copper by tin in Sn(II). Alkaline baths are not used in printed circuit board technology because it has destructive influence on resists. Besides acidic baths complex compounds contain additional stability solution composition which modify structure of obtained tin film. Quality and thickness tin layer are fundamental parameters which determine its protective character. The research test were done in thiourea-type electroless tin bath. The influence of different parameters on n rate of tin deposition and thickness of Sn coating were determined: temperature of the bath, Sn(II)-salt, thiourea and HCl concentration. Tin layers were depositioned on electrolytical copper foil. The thickness of Sn coating was determined by coulometry in 2M HCl. The rate deposition process depends mainly on the thiourea and HCl concentrations in solution. The temperature is also a very important parameter. The thickness of tin layer grows when the temperature increase. Although above 70°C appear undesirable thiourea decomposition. The results of the investigation show that further investigations are necessary for this solution.

  1. Thermally evaporated mechanically hard tin oxide thin films for opto-electronic apllications

    NASA Astrophysics Data System (ADS)

    Tripathy, Sumanta K.; Rajeswari, V. P.

    2014-01-01

    Tungsten doped tin oxide (WTO) and Molybdenum doped tin oxide (MoTO) thin film were deposited on corn glass by thermal evaporation method. The films were annealed at 350°C for one hour. Structural analysis using Xray diffraction data shows both the films are polycrystalline in nature with monoclinic structure of tin oxide, Sn3O4, corresponding to JCPDS card number 01-078-6064. SEM photograph showed that both the films have spherical grains with size in the range of 20-30 nm. Compositional analysis was carried out using EDS which reveals the presence of Sn, O and the dopant Mo/W only thereby indicating the absence of any secondary phase in the films. The films are found to contain nearly 6 wt% of Mo, 8 wt% of W as dopants respectively. The transmission pattern for both the films in the spectral range 200 - 2000 nm shows that W doping gives a transparency of nearly 80% from 380 nm onwards while Mo doping has less transparency of 39% at 380nm. Film hardness measurement using Triboscope shows a film hardness of about 9-10 GPa for both the films. It indicates that W or M doping in tin oxide provides the films the added advantage of withstanding the mechanical wear and tear due to environmental fluctuations By optimizing the optical and electrical properties, W/Mo doped tin oxide films may be explored as window layers in opto-electronic applications such as solar cells.

  2. Spray deposited copper zinc tin sulphide (Cu2ZnSnS4) film as a counter electrode in dye sensitized solar cells.

    PubMed

    Swami, Sanjay Kumar; Chaturvedi, Neha; Kumar, Anuj; Chander, Nikhil; Dutta, Viresh; Kumar, D Kishore; Ivaturi, A; Senthilarasu, S; Upadhyaya, Hari M

    2014-11-21

    Stoichiometric thin films of Cu2ZnSnS4 (CZTS) were deposited by the spray technique on a FTO coated glass substrate, with post-annealing in a H2S environment to improve the film properties. CZTS films were used as a counter electrode (CE) in Dye-Sensitized Solar Cells (DSCs) with N719 dye and an iodine electrolyte. The DSC of 0.25 cm(2) area using a CE of CZTS film annealed in a H2S environment under AM 1.5G illumination (100 mW cm(-2)) exhibited a short circuit current density (JSC) = 18.63 mA cm(-2), an open circuit voltage (VOC) = 0.65 V and a fill factor (FF) = 0.53, resulting in an overall power conversion efficiency (PCE) = 6.4%. While the DSC using as deposited CZTS film as a CE showed the PCE = 3.7% with JSC = 13.38 mA cm(-2), VOC = 0.57 V and FF = 0.48. Thus, the spray deposited CZTS films can play an important role as a CE in the large area DSC fabrication.

  3. Tin Oxide Films On Glass Substrates By A SOL-GEL Technique

    NASA Astrophysics Data System (ADS)

    Puyane, R.; Kato, I.

    1983-11-01

    The novel sol-gel technique has been implemented to deposit electroconductive tin oxide films to be used as transparent electrodes, mainly for display applications. Thin films of antimony-doped tin oxide were deposited on several types of glass substrates (soda-lime-silica, borosilicate and fused silica) using a dip-coating procedure. Alcoholic solutions of tin and antimony organometallic compounds were prepared under controlled conditions. The dipcoating procedure is described° in detail as well as subsequent thermal treatments under controlled atmosphere and temperatures up to 630 C. The optical and electrical characteristics of the films were studied as a function of the process parameters, firing conditions and number of coatings. After the subsequent thermal treatments, 2film resistances of about 200 ohms square could be measured corresponding to resistivities of about 10 ohm cm. The films optical transmission was above 80 percent.

  4. A Two-Step Absorber Deposition Approach To Overcome Shunt Losses in Thin-Film Solar Cells: Using Tin Sulfide as a Proof-of-Concept Material System

    SciTech Connect

    Steinmann, Vera; Chakraborty, Rupak; Rekemeyer, Paul H.; Hartman, Katy; Brandt, Riley E.; Polizzotti, Alex; Yang, Chuanxi; Moriarty, Tom; Gradečak, Silvija; Gordon, Roy G.; Buonassisi, Tonio

    2016-08-31

    As novel absorber materials are developed and screened for their photovoltaic (PV) properties, the challenge remains to reproducibly test promising candidates for high-performing PV devices. Many early-stage devices are prone to device shunting due to pinholes in the absorber layer, producing 'false-negative' results. Here, we demonstrate a device engineering solution toward a robust device architecture, using a two-step absorber deposition approach. We use tin sulfide (SnS) as a test absorber material. The SnS bulk is processed at high temperature (400 degrees C) to stimulate grain growth, followed by a much thinner, low-temperature (200 degrees C) absorber deposition. At a lower process temperature, the thin absorber overlayer contains significantly smaller, densely packed grains, which are likely to provide a continuous coating and fill pinholes in the underlying absorber bulk. We compare this two-step approach to the more standard approach of using a semi-insulating buffer layer directly on top of the annealed absorber bulk, and we demonstrate a more than 3.5x superior shunt resistance Rsh with smaller standard error ..sigma..Rsh. Electron-beam-induced current (EBIC) measurements indicate a lower density of pinholes in the SnS absorber bulk when using the two-step absorber deposition approach. We correlate those findings to improvements in the device performance and device performance reproducibility.

  5. Preparation of textural lamellar tin deposits via electrodeposition

    NASA Astrophysics Data System (ADS)

    Wen, Xiaoyu; Pan, Xiaona; Wu, Libin; Li, Ruinan; Wang, Dan; Zhang, Jinqiu; Yang, Peixia

    2017-06-01

    Lamellar tin deposits were prepared by galvanostatical electroplating from the aqueous acidic-sulfate bath, with gelatin and benzalacetone dissolved in ethanol (ABA+EtOH) as additive, and their morphologies were investigated by scanning electron microscopy. Cathodic polarization curves revealed that the absorbability of ABA+EtOH on the cathode surface was higher than that of gelatin. X-ray diffraction analysis indicated preferred orientations of tin growth led to the formation of lamellar structure and distortion of tin lattice. The growth mechanism of lamellar tin was also discussed.

  6. Amorphous tin-cadmium oxide films and the production thereof

    SciTech Connect

    Li, Xiaonan; Gessert, Timothy A

    2013-10-29

    A tin-cadmium oxide film having an amorphous structure and a ratio of tin atoms to cadmium atoms of between 1:1 and 3:1. The tin-cadmium oxide film may have an optical band gap of between 2.7 eV and 3.35 eV. The film may also have a charge carrier concentration of between 1.times.10.sup.20 cm.sup.-3 and 2.times.10.sup.20 cm.sup.-3. The tin cadmium oxide film may also exhibit a Hall mobility of between 40 cm.sup.2V.sup.-1 s.sup.-1 and 60 cm.sup.2V.sup.-1 s.sup.-1. Also disclosed is a method of producing an amorphous tin-cadmium oxide film as described and devices using same.

  7. Tin induced a-Si crystallization in thin films of Si-Sn alloys

    SciTech Connect

    Neimash, V. E-mail: oleks.goushcha@nuportsoft.com; Poroshin, V.; Goushcha, A. O. E-mail: oleks.goushcha@nuportsoft.com; Shepeliavyi, P.; Yukhymchuk, V.; Melnyk, V.; Kuzmich, A.; Makara, V.

    2013-12-07

    Effects of tin doping on crystallization of amorphous silicon were studied using Raman scattering, Auger spectroscopy, scanning electron microscopy, and X-ray fluorescence techniques. Formation of silicon nanocrystals (2–4 nm in size) in the amorphous matrix of Si{sub 1−x}Sn{sub x}, obtained by physical vapor deposition of the components in vacuum, was observed at temperatures around 300 °C. The aggregate volume of nanocrystals in the deposited film of Si{sub 1−x}Sn{sub x} exceeded 60% of the total film volume and correlated well with the tin content. Formation of structures with ∼80% partial volume of the nanocrystalline phase was also demonstrated. Tin-induced crystallization of amorphous silicon occurred only around the clusters of metallic tin, which suggested the crystallization mechanism involving an interfacial molten Si:Sn layer.

  8. Strain and Cohesive Energy of TiN Deposit on Al(001) Surface: Density Functional Calculation

    NASA Astrophysics Data System (ADS)

    Ren, Yuan; Liu, Xuejie

    2016-07-01

    To apply the high hardness of TiN film to soft and hard multilayer composite sheets, we constructed a new type of composite structural material with ultra-high strength. The strain of crystal and cohesive energy between the atoms in the eight structures of N atom, Ti atom, 2N2Ti island and TiN rock salt deposited on the Al(001) surface were calculated with the first-principle ultra-soft pseudopotential approach of the plane wave based on the density functional theory. The calculations of the cohesive energy showed that N atoms could be deposited in the face-centered-cubic vacancy position of the Al(001) surface and results in a cubic structure AlN surface. The TiN film could be deposited on the interface of β-AlN. The calculations of the strains showed that the strain in the TiN film deposited on the Al(001) surface was less than that in the 2N2Ti island deposited on the Al(001) surface. The diffusion behavior of interface atom N was investigated by a nudged elastic band method. Diffusion energy calculation showed that the N atom hardly diffused to the substrate Al layer.

  9. Spin current transport in ceramic: TiN thin film

    SciTech Connect

    An, Hongyu; Kanno, Yusuke; Tashiro, Takaharu; Nakamura, Yoshio; Shi, Ji; Ando, Kazuya

    2016-03-21

    The spin current transport property in a ceramic material TiN has been investigated at room temperature. By attaching TiN thin films on Ni{sub 20}Fe{sub 80} with different thicknesses of TiN, the spin pumping experiment has been conducted, and the spin diffusion length in TiN was measured to be around 43 nm. Spin-torque ferromagnetic resonance has also been taken to investigate the spin Hall angle of TiN, which was estimated to be around 0.0052. This study on ceramic material provides a potential selection in emerging materials for spintronics application.

  10. Spin current transport in ceramic: TiN thin film

    NASA Astrophysics Data System (ADS)

    An, Hongyu; Kanno, Yusuke; Tashiro, Takaharu; Nakamura, Yoshio; Shi, Ji; Ando, Kazuya

    2016-03-01

    The spin current transport property in a ceramic material TiN has been investigated at room temperature. By attaching TiN thin films on Ni20Fe80 with different thicknesses of TiN, the spin pumping experiment has been conducted, and the spin diffusion length in TiN was measured to be around 43 nm. Spin-torque ferromagnetic resonance has also been taken to investigate the spin Hall angle of TiN, which was estimated to be around 0.0052. This study on ceramic material provides a potential selection in emerging materials for spintronics application.

  11. Excimer laser micromachining of TiN films from chromium and copper sacrificial layers

    NASA Astrophysics Data System (ADS)

    Dowling, A. J.; Ghantasala, M. K.; Hayes, J. P.; Harvey, E. C.; Doyle, E. D.

    2002-10-01

    This paper presents results on the laser micromachining of TiN films. Machining performance was evaluated in terms of patterning quality and the ability to remove TiN with minimal interference with an underlying sacrificial layer. TiN was arc-deposited onto (100) silicon substrate with chromium (Cr) and copper (Cu) sacrificial layers. Films were also deposited onto bare silicon substrates under the same conditions. These films were analysed for their composition and structure using Rutherford backscattering spectroscopy and x-ray diffraction techniques. Laser micromachining was performed using a KrF excimer laser at 248 nm. The effect of fluence and number of shots on the machined features has been investigated in detail. The patterned features were examined using optical, confocal and scanning electron microscopes. The characteristics observed were analysed and compared in all three sets of samples. The results showed selective removal of TiN films from Cr and Cu sacrificial layers under different conditions. The machining of TiN from (100) silicon showed relatively poor definition of patterned features. The analysis of these results indicated that laser machining of TiN from Cr and Cu layers is best explained using the explosion mechanism of removal.

  12. Electrical properties of TiN on gallium nitride grown using different deposition conditions and annealing

    SciTech Connect

    Li, Liuan; Kishi, Akinori; Shiraishi, Takayuki; Jiang, Ying; Wang, Qingpeng; Ao, Jin-Ping

    2014-03-15

    This study evaluates the thermal stability of different refractory metal nitrides used as Schottky electrodes on GaN. The results demonstrate that TiN, MoSiN, and MoN possess good rectification and adhesion strength, with barrier heights of 0.56, 0.54, and 0.36 eV, respectively. After thermal treatment at 850 °C for 1 min, the TiN and MoN electrodes still exhibit rectifying characteristics, while the MoSiN degrades to an ohmic-like contact. For further study, several TiN films are deposited using different N{sub 2}/Ar reactive/inert sputtering gas ratios, thereby varying the nitrogen content present in the sputtering gas. Ohmic-like contact is observed with the pure Ti contact film, and Schottky characteristics are observed with the samples possessing nitrogen in the film. The average Schottky barrier height is about 0.5 eV and remains virtually constant with varying nitrogen deposition content. After examining Raman spectra and x-ray photoelectron spectroscopy results, the increase in the film resistivity after thermal treatment is attributed to oxidation and/or nitridation. Films deposited with a medium (40% and 60%) nitrogen content show the best film quality and thermal stability.

  13. The Surface Resistance of Superconducting A15 Niobium-Tin Films at 8.6 GHZ

    NASA Astrophysics Data System (ADS)

    Allen, Laura Henrietta

    A calorimetric technique for measuring the temperature dependence of the surface resistance of high-T(,c) superconducting thin films at 8.6 GHz has been developed. The technique has been applied to study electron-beam, co-deposited films of the A15 phase of Niobium-Tin with the goal of optimizing the microwave losses of the material. In addition, films of sputtered Niobium-Tin, a Niobium-Zirconium alloy, and Niobium-Nitride were also studied. For the evaporated Niobium-Tin films, carefully controlled deposition temperatures of greater than 900 C are necessary to obtain the lowest losses. A sharp transition is observed for stoichiometric material (25 percent Tin), but for the understoichiometric compositions the transitions are wider, yielding excessive losses in the material. Films prepared by magnetron sputtering behave similarly. A procedure, phase-locking, for preparing the stoichiometric composition which does not require exact control of the deposition rates has been developed and successfully demonstrated with the evaporated films. The experimental data are compared with two theoretical predictions: one for the superconducting state based on the BCS theory and a normal-state calculation in the classical skin-depth limit. When the residual losses (10 micro-ohms) are subtracted from the data, the behavior predicted for the superconducting state is observed. The normal-state losses, however, are anomalously large for the Niobium -Tin films. Possible explanations of this result are discussed. Reduced gaps are also obtained for the samples from their low temperature surface resistance. Values obtained for the Niobium-Tin films are lower than those from other measurements and may be due to poor material near the substrate interface. Even at the present level of material development, the prognosis for the application of Niobium-Tin films to microwave devices appears favorable. When compared with Niobium, the most common material choice, Niobium -Tin films as

  14. Growth behavior and properties of atomic layer deposited tin oxide on silicon from novel tin(II)acetylacetonate precursor and ozone

    SciTech Connect

    Kannan Selvaraj, Sathees; Feinerman, Alan; Takoudis, Christos G.

    2014-01-15

    In this work, a novel liquid tin(II) precursor, tin(II)acetylacetonate [Sn(acac){sub 2}], was used to deposit tin oxide films on Si(100) substrate, using a custom-built hot wall atomic layer deposition (ALD) reactor. Three different oxidizers, water, oxygen, and ozone, were tried. Resulting growth rates were studied as a function of precursor dosage, oxidizer dosage, reactor temperature, and number of ALD cycles. The film growth rate was found to be 0.1 ± 0.01 nm/cycle within the wide ALD temperature window of 175–300 °C using ozone; no film growth was observed with water or oxygen. Characterization methods were used to study the composition, interface quality, crystallinity, microstructure, refractive index, surface morphology, and resistivity of the resulting films. X-ray photoelectron spectra showed the formation of a clean SnO{sub x}–Si interface. The resistivity of the SnO{sub x} films was calculated to be 0.3 Ω cm. Results of this work demonstrate the possibility of introducing Sn(acac){sub 2} as tin precursor to deposit conducting ALD SnO{sub x} thin films on a silicon surface, with clean interface and no formation of undesired SiO{sub 2} or other interfacial reaction products, for transparent conducting oxide applications.

  15. Biomimetic thin film deposition

    NASA Astrophysics Data System (ADS)

    Rieke, P. C.; Campbell, A. A.; Tarasevich, B. J.; Fryxell, G. E.; Bentjen, S. B.

    1991-04-01

    Surfaces derivatized with organic functional groups were used to promote the deposition of thin films of inorganic minerals. These derivatized surfaces were designed to mimic the nucleation proteins that control mineral deposition during formation of bone, shell, and other hard tissues in living organisms. By the use of derivatized substrates control was obtained over the phase of mineral deposited, the orientation of the crystal lattice and the location of deposition. These features are of considerable importance in many technically important thin films, coatings, and composite materials. Methods of derivatizing surfaces are considered and examples of controlled mineral deposition are presented.

  16. Plasma-enhanced atomic layer deposition for plasmonic TiN

    NASA Astrophysics Data System (ADS)

    Otto, Lauren M.; Hammack, Aaron T.; Aloni, Shaul; Ogletree, D. Frank; Olynick, Deirdre L.; Dhuey, Scott; Stadler, Bethanie J. H.; Schwartzberg, Adam M.

    2016-09-01

    This work presents the low temperature plasma-enhanced atomic layer deposition (PE-ALD) of TiN, a promising plasmonic synthetic metal. The plasmonics community has immediate needs for alternatives to traditional plasmonic materials (e.g. Ag and Au), which lack chemical, thermal, and mechanical stability. Plasmonic alloys and synthetic metals have significantly improved stability, but their growth can require high-temperatures (>400 °C), and it is difficult to control the thickness and directionality of the resulting film, especially on technologically important substrates. Such issues prevent the application of alternative plasmonic materials for both fundamental studies and large-scale industrial applications. Alternatively, PE-ALD allows for conformal deposition on a variety of substrates with consistent material properties. This conformal coating will allow the creation of exotic three-dimensional structures, and low-temperature deposition techniques will provide unrestricted usage across a variety of platforms. The characterization of this new plasmonic material was performed with in-situ spectroscopic ellipsometry as well as Auger electron spectroscopy for analysis of TiN film sensitivity to oxide cross-contamination. Plasmonic TiN films were fabricated, and a chlorine plasma etch was found to pattern two dimensional gratings as a test structure. Optical measurements of 900 nm period gratings showed reasonable agreement with theoretical modeling of the fabricated structures, indicating that ellipsometry models of the TiN were indeed accurate.

  17. Enhanced photoelectrochemical water oxidation via atomic layer deposition of TiO2 on fluorine-doped tin oxide nanoparticle films

    NASA Astrophysics Data System (ADS)

    Cordova, Isvar A.; Peng, Qing; Ferrall, Isa L.; Rieth, Adam J.; Hoertz, Paul G.; Glass, Jeffrey T.

    2015-04-01

    TiO2 is an exemplary semiconductor anode material for photoelectrochemical (PEC) water-splitting electrodes due to its functionality, long-term stability in corrosive environments, nontoxicity, and low cost. In this study, TiO2 photoanodes with enhanced photocurrent density were synthesized by atomic layer deposition (ALD) of TiO2 onto a porous, transparent, and conductive fluorine-doped tin oxide nanoparticle (nanoFTO) scaffold fabricated by solution processing. The simplicity and disordered nature of the nanoFTO nanostructure combined with the ultrathin conformal ALD TiO2 coatings offers advantages including decoupling charge carrier diffusion length from optical penetration depth, increased photon absorption probability through scattering, complimentary photon absorption, and favorable interfaces for charge separation and transfer across the various junctions. We examine the effects of porosity of the nanoFTO scaffold and thickness of the TiO2 coating on PEC performance and achieve an optimal photocurrent of 0.7 mA cm-2 at 0 V vs. Ag/AgCl under 100 mW cm-2 AM 1.5 G irradiation in a 1 M KOH aqueous electrolyte. Furthermore, the fundamental mechanisms behind the improvements are characterized via cyclic voltammetry, incident photon-to-current efficiency, transient photocurrent spectroscopy, and electrochemical impedance spectroscopy and are contrasted with those of single crystal rutile TiO2 nanowires. The strategies employed in this work highlight the opportunities inherent to these types of heteronanostructures, where the lessons may be applied to improve the PEC conversion efficiencies of other promising semiconductors, such as hematite (α-Fe2O3) and other materials more sensitive to visible light.TiO2 is an exemplary semiconductor anode material for photoelectrochemical (PEC) water-splitting electrodes due to its functionality, long-term stability in corrosive environments, nontoxicity, and low cost. In this study, TiO2 photoanodes with enhanced photocurrent

  18. Enhanced photoelectrochemical water oxidation via atomic layer deposition of TiO2 on fluorine-doped tin oxide nanoparticle films.

    PubMed

    Cordova, Isvar A; Peng, Qing; Ferrall, Isa L; Rieth, Adam J; Hoertz, Paul G; Glass, Jeffrey T

    2015-05-14

    TiO2 is an exemplary semiconductor anode material for photoelectrochemical (PEC) water-splitting electrodes due to its functionality, long-term stability in corrosive environments, nontoxicity, and low cost. In this study, TiO2 photoanodes with enhanced photocurrent density were synthesized by atomic layer deposition (ALD) of TiO2 onto a porous, transparent, and conductive fluorine-doped tin oxide nanoparticle (nanoFTO) scaffold fabricated by solution processing. The simplicity and disordered nature of the nanoFTO nanostructure combined with the ultrathin conformal ALD TiO2 coatings offers advantages including decoupling charge carrier diffusion length from optical penetration depth, increased photon absorption probability through scattering, complimentary photon absorption, and favorable interfaces for charge separation and transfer across the various junctions. We examine the effects of porosity of the nanoFTO scaffold and thickness of the TiO2 coating on PEC performance and achieve an optimal photocurrent of 0.7 mA cm(-2) at 0 V vs. Ag/AgCl under 100 mW cm(-2) AM 1.5 G irradiation in a 1 M KOH aqueous electrolyte. Furthermore, the fundamental mechanisms behind the improvements are characterized via cyclic voltammetry, incident photon-to-current efficiency, transient photocurrent spectroscopy, and electrochemical impedance spectroscopy and are contrasted with those of single crystal rutile TiO2 nanowires. The strategies employed in this work highlight the opportunities inherent to these types of heteronanostructures, where the lessons may be applied to improve the PEC conversion efficiencies of other promising semiconductors, such as hematite (α-Fe2O3) and other materials more sensitive to visible light.

  19. Substrate-insensitive atomic layer deposition of plasmonic titanium nitride films

    DOE PAGES

    Yu, Ing-Song; Cheng, Hsyi-En; Chang, Chun-Chieh; ...

    2017-02-06

    The plasmonic properties of titanium nitride (TiN) films depend on the type of substrate when using typical deposition methods such as sputtering. We show atomic layer deposition (ALD) of TiN films with very weak dependence of plasmonic properties on the substrate, which also suggests the prediction and evaluation of plasmonic performance of TiN nanostructures on arbitrary substrates under a given deposition condition. Our results also observe that substrates with more nitrogen-terminated (N-terminated) surfaces will have significant impact on the deposition rate as well as the film plasmonic properties. Furthermore, we illustrate that the plasmonic properties of ALD TiN films canmore » be tailored by simply adjusting the deposition and/or post-deposition annealing temperatures. These characteristics and the capability of conformal coating make ALD TiN films on templates ideal for applications that require the fabrication of complex 3D plasmonic nanostructures.« less

  20. Pulsed laser deposition of hydroxyapatite film on laser gas nitriding NiTi substrate

    NASA Astrophysics Data System (ADS)

    Yang, S.; Xing, W.; Man, H. C.

    2009-09-01

    A hydroxyapatite (HA) film was deposited on laser gas nitriding (LGN) NiTi alloy substrate using pulsed laser deposition technique. TiN dendrite prepared by LGN provided a higher number of nucleation sites for HA film deposition, which resulted in that a lot number of HA particles were deposited on TiN dendrites. Moreover, the rough LGN surface could make the interface adhesive strength between HA film and substrate increase as compared with that on bare NiTi substrate.

  1. Thermally evaporated mechanically hard tin oxide thin films for opto-electronic apllications

    SciTech Connect

    Tripathy, Sumanta K.; Rajeswari, V. P.

    2014-01-28

    Tungsten doped tin oxide (WTO) and Molybdenum doped tin oxide (MoTO) thin film were deposited on corn glass by thermal evaporation method. The films were annealed at 350°C for one hour. Structural analysis using Xray diffraction data shows both the films are polycrystalline in nature with monoclinic structure of tin oxide, Sn{sub 3}O{sub 4}, corresponding to JCPDS card number 01-078-6064. SEM photograph showed that both the films have spherical grains with size in the range of 20–30 nm. Compositional analysis was carried out using EDS which reveals the presence of Sn, O and the dopant Mo/W only thereby indicating the absence of any secondary phase in the films. The films are found to contain nearly 6 wt% of Mo, 8 wt% of W as dopants respectively. The transmission pattern for both the films in the spectral range 200 – 2000 nm shows that W doping gives a transparency of nearly 80% from 380 nm onwards while Mo doping has less transparency of 39% at 380nm. Film hardness measurement using Triboscope shows a film hardness of about 9–10 GPa for both the films. It indicates that W or M doping in tin oxide provides the films the added advantage of withstanding the mechanical wear and tear due to environmental fluctuations By optimizing the optical and electrical properties, W/Mo doped tin oxide films may be explored as window layers in opto-electronic applications such as solar cells.

  2. Demonstration of high-performance p-type tin oxide thin-film transistors using argon-plasma surface treatments

    NASA Astrophysics Data System (ADS)

    Bae, Sang-Dae; Kwon, Soo-Hun; Jeong, Hwan-Seok; Kwon, Hyuck-In

    2017-07-01

    In this work, we investigated the effects of low-temperature argon (Ar)-plasma surface treatments on the physical and chemical structures of p-type tin oxide thin-films and the electrical performance of p-type tin oxide thin-film transistors (TFTs). From the x-ray photoelectron spectroscopy measurement, we found that SnO was the dominant phase in the deposited tin oxide thin-film, and the Ar-plasma treatment partially transformed the tin oxide phase from SnO to SnO2 by oxidation. The resistivity of the tin oxide thin-film increased with the plasma-treatment time because of the reduced hole concentration. In addition, the root-mean-square roughness of the tin oxide thin-film decreased as the plasma-treatment time increased. The p-type oxide TFT with an Ar-plasma-treated tin oxide thin-film exhibited excellent electrical performance with a high current on-off ratio (5.2 × 106) and a low off-current (1.2 × 10-12 A), which demonstrates that the low-temperature Ar-plasma treatment is a simple and effective method for improving the electrical performance of p-type tin oxide TFTs.

  3. Production of amorphous tin oxide thin films and microstructural transformation induced by heat treatment

    NASA Astrophysics Data System (ADS)

    Chen, Z. W.; Lai, J. K. L.; Shek, C. H.; Chen, H. D.

    2005-10-01

    X-ray diffraction, scanning electron microscopy, transmission electron microscopy, and high resolution transmission electron microscopy were used to study tin oxide thin films deposited on Si(100) substrates at room temperature using pulsed laser deposition techniques with a sintered cassiterite SnO2 target and subsequently heat-treated. X-ray diffraction and scanning electron microscopy results demonstrated that the as-prepared thin films consisted of an amorphous matrix as well as plume-like features, which are shown many micropores. The thin films that were heat treated for 2 h at 150 °C had tetragonal rutile nanocrystalline SnO2 structures. The microstructural evolution of the tin oxide thin films during the heat treatment is discussed in the paper.

  4. Relationship between microstructure and electronic properties of energetically deposited zinc tin oxide

    NASA Astrophysics Data System (ADS)

    Murdoch, Billy James; McCulloch, Dougal G.; Partridge, James G.

    2016-06-01

    Thin films of amorphous n-type zinc tin oxide have been energetically deposited from a filtered cathodic vacuum arc at moderate temperatures. The characteristics of these films span a range suitable for semiconductor devices and transparent conducting oxide interconnects with carrier concentration and mobility dependent on local bonding. X-ray photoelectron spectroscopy (XPS) and electron diffraction have revealed that acceptor-like Sn(II) bonding in the films decreased with increasing growth temperature, resulting in higher n-type carrier concentrations. XPS and in situ Ar plasma treatment showed that downward surface band bending resulted from OH attachment. Persistent photoconductivity was attributed to the photoionization of oxygen vacancies.

  5. Energy bandgap variation in oblique angle-deposited indium tin oxide

    SciTech Connect

    Kim, Kyurin; Kim, Hyunsoo; Cho, Jaehee; Park, Jun Hyuk; Kim, Jong Kyu; Fred Schubert, E.

    2016-01-25

    Indium tin oxide (ITO) thin films deposited using the oblique angle deposition (OAD) technique exhibit a strong correlation between structural and optical properties, especially the optical bandgap energy. The microstructural properties of ITO thin films are strongly influenced by the tilt angle used during the OAD process. When changing the tilt angle, the refractive index, porosity, and optical bandgap energy of ITO films also change due to the existence of a preferential growth direction at the interface between ITO and the substrate. Experiments reveal that the ITO film's optical bandgap varies from 3.98 eV (at normal incident deposition) to 3.87 eV (at a 60° tilt angle)

  6. Structural, optical and electrical properties of tin oxide thin films for application as a wide band gap semiconductor

    NASA Astrophysics Data System (ADS)

    Sethi, Riti; Ahmad, Shabir; Aziz, Anver; Siddiqui, Azher Majid

    2015-08-01

    Tin oxide (SnO) thin films were synthesized using thermal evaporation technique. Ultra pure metallic tin was deposited on glass substrates using thermal evaporator under high vacuum. The thickness of the tin deposited films was kept at 100nm. Subsequently, the as-deposited tin films were annealed under oxygen environment for a period of 3hrs to obtain tin oxide films. To analyse the suitability of the synthesized tin oxide films as a wide band gap semiconductor, various properties were studied. Structural parameters were studied using XRD and SEM-EDX. The optical properties were studied using UV-Vis Spectrophotometry and the electrical parameters were calculated using the Hall-setup. XRD and SEM confirmed the formation of SnO phase. Uniform texture of the film can be seen through the SEM images. Presence of traces of unoxidised Sn has also been confirmed through the XRD spectra. The band gap calculated was around 3.6eV and the optical transparency around 50%. The higher value of band gap and lower value of optical transparency can be attributed to the presence of unoxidised Sn. The values of resistivity and mobility as measured by the Hall setup were 78Ωcm and 2.92cm2/Vs respectively. The reasonable optical and electrical parameters make SnO a suitable candidate for optoelectronic and electronic device applications.

  7. Structural, optical and electrical properties of tin oxide thin films for application as a wide band gap semiconductor

    SciTech Connect

    Sethi, Riti; Ahmad, Shabir; Aziz, Anver; Siddiqui, Azher Majid

    2015-08-28

    Tin oxide (SnO) thin films were synthesized using thermal evaporation technique. Ultra pure metallic tin was deposited on glass substrates using thermal evaporator under high vacuum. The thickness of the tin deposited films was kept at 100nm. Subsequently, the as-deposited tin films were annealed under oxygen environment for a period of 3hrs to obtain tin oxide films. To analyse the suitability of the synthesized tin oxide films as a wide band gap semiconductor, various properties were studied. Structural parameters were studied using XRD and SEM-EDX. The optical properties were studied using UV-Vis Spectrophotometry and the electrical parameters were calculated using the Hall-setup. XRD and SEM confirmed the formation of SnO phase. Uniform texture of the film can be seen through the SEM images. Presence of traces of unoxidised Sn has also been confirmed through the XRD spectra. The band gap calculated was around 3.6eV and the optical transparency around 50%. The higher value of band gap and lower value of optical transparency can be attributed to the presence of unoxidised Sn. The values of resistivity and mobility as measured by the Hall setup were 78Ωcm and 2.92cm{sup 2}/Vs respectively. The reasonable optical and electrical parameters make SnO a suitable candidate for optoelectronic and electronic device applications.

  8. Depositing Diamondlike Carbon Films

    NASA Technical Reports Server (NTRS)

    Mirtich, M. J.; Sovey, J. S.; Banks, B. A.

    1986-01-01

    New process demonstrated to make thin films (usually thousands of angstroms to few microns thick) that have properties of diamonds. Various plasma and ion-beam techniques employed to generate films. Films made by radio-frequency plasma decomposition of hydrocarbon gas or other alkanes, by low-energy carbon-ion-beam deposition, or by ion plating and dual ion technique using carbon target. Advantages of new process over others are films produced, though amorphous, are clear, extremely hard, chemically inert, of high resistivity, and have index of refraction of 3.2 properties similar to those of single-crystal diamonds. Films have possible uses in microelectronic applications, high-energy-laser and plastic windows, corrosion protection for metals, and other applications where desired properties of film shaped during the film-formation process.

  9. Aspects of nitrogen surface chemistry relevant to TiN chemical vapor deposition

    SciTech Connect

    Schulberg, M.T.; Allendorf, M.D.; Outka, D.A.

    1996-08-01

    NH{sub 3} is an important component of many chemical vapor deposition (CVD) processes for TiN films, which are used for diffusion barriers and other applications in microelectronic circuits. In this study, the interaction of NH{sub 3} with TiN surfaces is examined with temperature programmed desorption (TPD) and Auger electron spectroscopy. NH{sub 3} has two adsorption states on TiN: a chemisorbed state and a multilayer state. A new method for analyzing TPD spectra in systems with slow pumping speeds yields activation energies for desorption for the two states of 24 kcal/mol and 7.3 kcal/mol, respectively. The sticking probability into the chemisorption state is {approximately}0.06. These results are discussed in the context of TiN CVD. In addition, the high temperature stability of TiN is investigated. TiN decomposes to its elements only after heating to 1300 K, showing that decomposition is unlikely to occur under CVD conditions.

  10. Highly Textured Tin(II) Sulfide Thin Films Formed from Sheetlike Nanocrystal Inks

    SciTech Connect

    Herron, Steven M.; Tanskanen, Jukka T.; Roelofs, Katherine E.; Bent, Stacey F.

    2014-12-23

    Highly textured tin(II) sulfide thin films are prepared from a nanocrystal ink comprised of high-aspect-ratio nanosheets. The orthorhombic nanosheets are synthesized colloidally to isolate lateral growth and minimize the presence of alternate crystal phases. The tin sulfide films deposited from the nanosheets exhibit pure elemental composition, micrometer-sized grains, and a remarkable degree of texturing. The films consist of lamellar stacking of nanosheets with some intercalation, and the average sheet thickness is ~30 nm. The SnS films have an indirect band gap of 1.23 eV, and density functional theory calculations indicate minimal quantum confinement contributions. The anisotropic electronic properties of tin sulfide are greatly intensified in films formed by this process, yielding an in-plane mobility of 5.7 cm2/(V s) but an out-of-plane resistivity as high as 30 kΩ cm. This work represents a new strategy for nanocrystal inks in which the nanocrystal morphology is tailored to direct film orientation, grain size, and transport properties. The method provides a route for the deposition of high-quality, layered semiconductor thin films with applications in photovoltaics and two-dimensional (2-D) electronics.

  11. Synthesis and Characterization of Tin(IV) Oxide Obtained by Chemical Vapor Deposition Method

    NASA Astrophysics Data System (ADS)

    Nagirnyak, Svitlana V.; Lutz, Victoriya A.; Dontsova, Tatiana A.; Astrelin, Igor M.

    2016-07-01

    The effect of precursors on the characteristics of tin oxide obtained by chemical vapor deposition (CVD) method was investigated. The synthesis of nanosized tin(IV) oxide was carried out with the use of two different precursors: tin(II) oxalate obtained using tin chloride(II) and oxalic acid; tin(II) oxalate obtained using tin chloride(II); and ammonium oxalate. The synthesized tin(IV) oxide samples were studied by electron microscopy, X-ray diffraction and optical spectra. The lattice parameters of tin(IV) oxide samples were defined, the bandgap of samples were calculated.

  12. Synthesis and Characterization of Tin(IV) Oxide Obtained by Chemical Vapor Deposition Method.

    PubMed

    Nagirnyak, Svitlana V; Lutz, Victoriya A; Dontsova, Tatiana A; Astrelin, Igor M

    2016-12-01

    The effect of precursors on the characteristics of tin oxide obtained by chemical vapor deposition (CVD) method was investigated. The synthesis of nanosized tin(IV) oxide was carried out with the use of two different precursors: tin(II) oxalate obtained using tin chloride(II) and oxalic acid; tin(II) oxalate obtained using tin chloride(II); and ammonium oxalate. The synthesized tin(IV) oxide samples were studied by electron microscopy, X-ray diffraction and optical spectra. The lattice parameters of tin(IV) oxide samples were defined, the bandgap of samples were calculated.

  13. Optical properties of TiN thin films close to the superconductor-insulator transition.

    SciTech Connect

    Pfuner, F.; Degiorgi, L.; Baturina, T. I.; Vinokur, V. M.; Baklanov, M. R.; Materials Science Division; ETH Zurich; Inst. Semiconductor Physics; IMEC Kapeldreef

    2009-11-10

    We present the intrinsic optical properties over a broad spectral range of TiN thin films deposited on an Si/SiO{sub 2} substrate. We analyze the measured reflectivity spectra of the film-substrate multilayer structure within a well-establish procedure based on the Fresnel equation and extract the real part of the optical conductivity of TiN. We identify the metallic contribution as well as the finite energy excitations and disentangle the spectral weight distribution among them. The absorption spectrum of TiN bears some similarities with the electrodynamic response observed in the normal state of the high-temperature superconductors. Particularly, a mid-infrared feature in the optical conductivity is quite reminiscent of a pseudogap-like excitation.

  14. Effects of process parameters on sheet resistance uniformity of fluorine-doped tin oxide thin films.

    PubMed

    Hudaya, Chairul; Park, Ji Hun; Lee, Joong Kee

    2012-01-05

    An alternative indium-free material for transparent conducting oxides of fluorine-doped tin oxide [FTO] thin films deposited on polyethylene terephthalate [PET] was prepared by electron cyclotron resonance - metal organic chemical vapor deposition [ECR-MOCVD]. One of the essential issues regarding metal oxide film deposition is the sheet resistance uniformity of the film. Variations in process parameters, in this case, working and bubbler pressures of ECR-MOCVD, can lead to a change in resistance uniformity. Both the optical transmittance and electrical resistance uniformity of FTO film-coated PET were investigated. The result shows that sheet resistance uniformity and the transmittance of the film are affected significantly by the changes in bubbler pressure but are less influenced by the working pressure of the ECR-MOCVD system.

  15. Underpotential deposition of tin(II) on a gold disc electrode and determination of tin in a tin plate sample.

    PubMed

    Qiao, Zhiqing; Shang, Wei; Zhang, Xin; Wang, Chunming

    2005-04-01

    This work describes a study of the underpotential deposition (UPD) of Sn2+ on a polycrystalline gold disc electrode using cyclic voltammetry (CV) and chronocoulometry (CC). Sn2+ ions showed well-defined peaks from UPD and UPD stripping (UPD-S) in 1 mol/L HCl solutions, while bulk deposition (BD) and BD stripping (BD-S) of the ions were also observed. The measured UPD shifts, DeltaE(UPD), between the UPD-S and the BD-S peaks were more than 200 mV. The UPD charge and the surface coverage of tin were measured by CC. A new method for determining Sn2+ was therefore developed, based on the excellent electrochemical properties of the Au/Sn UPD system. A plot of the UPD-DPASV (differential pulse anodic stripping voltammetry) signal versus the Sn(II) concentration was obtained for [Sn(II)] of 1.98x10(-7) to 3.64x10(-5) M. The method developed here has been applied to determine the tin in a tin plate sample.

  16. Electrochromic properties of WO3 thin film onto gold nanoparticles modified indium tin oxide electrodes

    NASA Astrophysics Data System (ADS)

    Deng, Jiajia; Gu, Ming; Di, Junwei

    2011-04-01

    Gold nanoparticles (GNPs) thin films, electrochemically deposited from hydrogen tetrachloroaurate onto transparent indium tin oxide (ITO) thin film coated glass, have different color prepared by variation of the deposition condition. The color of GNP film can vary from pale red to blue due to different particle size and their interaction. The characteristic of GNPs modified ITO electrodes was studied by UV-vis spectroscopy, scanning electron microscope (SEM) images and cyclic voltammetry. WO3 thin films were fabricated by sol-gel method onto the surface of GNPs modified electrode to form the WO3/GNPs composite films. The electrochromic properties of WO3/GNPs composite modified ITO electrode were investigated by UV-vis spectroscopy and cyclic voltammetry. It was found that the electrochromic performance of WO3/GNPs composite films was improved in comparison with a single component system of WO3.

  17. On-line coating of glass with tin oxide by atmospheric pressure chemical vapor deposition.

    SciTech Connect

    Allendorf, Mark D.; Sopko, J.F. (PPF Industries, Pittsburgh, PA); Houf, William G.; Chae, Yong Kee; McDaniel, Anthony H.; Li, M. (PPF Industries, Pittsburgh, PA); McCamy, J.W.

    2006-11-01

    Atmospheric pressure chemical vapor deposition (APCVD) of tin oxide is a very important manufacturing technique used in the production of low-emissivity glass. It is also the primary method used to provide wear-resistant coatings on glass containers. The complexity of these systems, which involve chemical reactions in both the gas phase and on the deposition surface, as well as complex fluid dynamics, makes process optimization and design of new coating reactors a very difficult task. In 2001 the U.S. Dept. of Energy Industrial Technologies Program Glass Industry of the Future Team funded a project to address the need for more accurate data concerning the tin oxide APCVD process. This report presents a case study of on-line APCVD using organometallic precursors, which are the primary reactants used in industrial coating processes. Research staff at Sandia National Laboratories in Livermore, CA, and the PPG Industries Glass Technology Center in Pittsburgh, PA collaborated to produce this work. In this report, we describe a detailed investigation of the factors controlling the growth of tin oxide films. The report begins with a discussion of the basic elements of the deposition chemistry, including gas-phase thermochemistry of tin species and mechanisms of chemical reactions involved in the decomposition of tin precursors. These results provide the basis for experimental investigations in which tin oxide growth rates were measured as a function of all major process variables. The experiments focused on growth from monobutyltintrichloride (MBTC) since this is one of the two primary precursors used industrially. There are almost no reliable growth-rate data available for this precursor. Robust models describing the growth rate as a function of these variables are derived from modeling of these data. Finally, the results are used to conduct computational fluid dynamic simulations of both pilot- and full-scale coating reactors. As a result, general conclusions are

  18. Fabrication and characterization of Sb-doped Sn02 thin films derived from methacrylic acid modified tin(IV)alkoxides

    NASA Astrophysics Data System (ADS)

    Kololuoma, Terho K.; Tolonen, Ari; Johansson, Leena-Sisko; Campbell, Joseph M.; Karkkainen, Ari H. O.; Hiltunen, Marianne; Haatainen, Tomi; Rantala, Juha T.

    2002-10-01

    We report on the fabrication of transparent, conductive and directly photopatternable, pure and Sb-doped tin dioxide thin films. Precursors used were antimony(III)isopropoxide and a photo-reactive tin alkoxide synthesized from tin(IV)isopropoxide and methacrylic acid. The synthesis of methacrylic acid modified tin alkoxide was monitored in-situ using IR- and ESI-TOF mass spectroscopic techniques. Sb-doped organo-tin films were deposited via single layer spin coating. After deposition the films were patterned via photopolymerization, using a mercury I-line UV-lamp. All investigated materials could be patterned with 3 μm features. After development in isopropanol, the films were annealed in air, in order to obtain crystalline and conductive films. The electrical conductivities of the annealed thin films with, and without, UV-irradiation were determined using a linear four-point method. The direct photopatterning process was found to increase the film conductivity for all the Sb-doping levels tested. The mechanisms for the increased conductivity were characterized using AFM, XPS and XRD techniques.

  19. Characteristic corrosion resistance of nanocrystalline TiN films prepared by high density plasma reactive magnetron sputtering.

    PubMed

    Kim, J H; Kang, C G; Kim, Y T; Cheong, W S; Song, P K

    2013-07-01

    Nanocytalline TiN films were deposited on non-alkali glass and Al substrates by reactive DC magnetron sputtering (DCMS) with an electromagnetic field system (EMF). The microstructure and corrosion resistance of the TiN-coated Al substrates were estimated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and electrochemical methods. All the TiN films shows that they have a (111) preferred orientation at room temperature. TiN films deposited on Al substrate using only DCMS 400 W showed a sheet resistance of 3.22 x 10-1 omega/symbol see texts (resistivity, 3.22 x 10-5 omegacm). On the other hand, a relatively low sheet resistance of 1.91 x 10-1 omega/symbol see text (1.91 x 10-5 omegacm) was obtained for the dense nanocrystalline TiN film deposited on Al substrate using DCMS 375 W+ EMF 25 W, indicating that the introduction of an EMF system enhanced the electrical properties of the TiN film. TiN films deposited on Al substrate at 400 degreesC had a (200) preferred orientation with the lowest sheet resistance of 1.28x10-1 omega/symbol see texts (1.28 x 10-5 omegacm) which was attributed to reduced nano size defects and an improvement of the crystallinity. Potentiostatic and Potentiodynamic tests with a TiN-coated Al showed good corrosion resistance (l/corr, = 2.03 microA/cm2, Ecorr = -348 mV) compared to the uncoated Al substrate (/corr = 4.45 microA/cm2, Ecorr = -650 mV). Furthermore, EMF system showed that corrosion resistance of the TiN film also was enhanced compared to DCMS only. For the TiN film deposited on Al substrate at 400 degreesC, corrosion current and potential was 0.63 micro/cm2 and -1.5 mV, respectively. This improved corrosion resistance of the TiN film could be attributed to the densification of the film caused by enhancement of nitrification with increasing high reactive nitrogen radicals.

  20. Tailoring of absorption edge by thermal annealing in tin oxide thin films

    SciTech Connect

    Thakur, Anup; Gautam, Sanjeev; Kumar, Virender; Chae, K. H.; Lee, Ik-Jae; Shin, Hyun Joon

    2015-05-15

    Tin oxide (SnO{sub 2}) thin films were deposited by radio-frequency (RF) magnetron sputtering on silicon and glass substrates in different oxygen-to-argon gas-flow ratio (O{sub 2}-to-Ar = 0%, 10%, 50%). All films were deposited at room temperature and fixed working pressures, 10 mTorr. The X-ray diffraction (XRD) measurement suggests that all films were crystalline in nature except film deposited in argon environment. Thin films were annealed in air at 200 °C, 400 °C and 600 °C for two hours. All films were highly transparent except the film deposited only in the argon environment. It was also observed that transparency was improved with annealing due to decrease in oxygen vacancies. Atomic force microscopy (AFM), results showed that the surface of all the films were highly flat and smooth. Blue shift was observed in the absorption edge with annealing temperature. It was also observed that there was not big change in the absorption edge with annealing for films deposited in 10% and 50% oxygen-to-argon gas-flow ratio.

  1. The effect of surface chemistry and nanotopography of titanium nitride (TiN) films on 3T3-L1 fibroblasts.

    PubMed

    Cyster, L A; Parker, K G; Parker, T L; Grant, D M

    2003-10-01

    The cell-material interaction of 3T3-L1 fibroblasts with TiN films was studied in vitro. TiN films were deposited onto glass substrates to thicknesses of 0.2 and 1.0 microm by pulsed dc reactive magnetron sputtering. For comparison TiN films were deposited by closed field unbalanced magnetron sputter ion plating by Teer Coatings Ltd. (Hartlebury, UK) to result in TiN films with similar surface chemistries but having increased topographical features. TiN films were characterized using X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy. The cell-material interaction was examined morphologically by monitoring fibroblast attachment and growth and comparing to a control substrate. At early time points increased numbers of 3T3-L1 fibroblasts were found to preferentially attach to TiN films with an increase in the percentage of surface interstitial nitrogen and also with decreased topographical features. At later time points the presence of nanotopography appeared to play a greater role than the effects of surface chemistry and resulted in increased numbers of attached 3T3-L1 fibroblasts. The results show that by changing the deposition route and parameters to produce TiN films, the resultant films can be used to investigate the cellular response to surfaces of differing chemistry and topography. Copyright 2003 Wiley Periodicals, Inc. J Biomed Mater Res 67A: 138-147, 2003

  2. The effect of surface chemistry and nanotopography of titanium nitride (TiN) films on primary hippocampal neurones.

    PubMed

    Cyster, L A; Parker, K G; Parker, T L; Grant, D M

    2004-01-01

    The cell-substrate interaction of primary hippocampal neurones with thin films of TiN was studied in vitro. TiN films of different surface chemistries and topographies were deposited by pulsed DC reactive magnetron sputtering and closed field unbalanced magnetron sputter ion plating by Teer Coatings Ltd., Hartlebury, UK to result in TiN films with similar surface chemistries but different topographical features. TiN films were characterised using X-ray diffraction, X-ray photoelectron spectroscopy and atomic force microscopy. The neuron-substrate interaction was examined using environmental scanning electron microscopy (FEG-ESEM) for morphological information. Bromodeoxyuridine and TUNEL assays were used to identify proliferating neurones as well as apoptotic neurones. Fluorescent staining for MAP-2 was used to label neuronal network formation. Primary hippocampal neurones were found to attach and spread to all of the TiN film chemistries and topographies investigated. Neuronal network morphology appeared to be more preferential on the nitrogen rich TiN films and also with reduced nanotopographical features.

  3. Study of indium tin oxide films exposed to atomic axygen

    NASA Technical Reports Server (NTRS)

    Snyder, Paul G.; De, Bhola N.; Woollam, John A.; Coutts, T. J.; Li, X.

    1989-01-01

    A qualitative simulation of the effects of atomic oxygen has been conducted on indium tin oxide (ITO) films prepared by dc sputtering onto room-temperature substrates, by exposing them to an RF-excited oxygen plasma and characterizing the resulting changes in optical, electrical, and structural properties as functions of exposure time with ellipsometry, spectrophotometry, resistivity, and X-ray measurements. While the films thus exposed exhibit reduced resistivity and optical transmission; both of these effects, as well as partial crystallization of the films, may be due to sample heating by the plasma. Film resistivity is found to stabilize after a period of exposure.

  4. Study of indium tin oxide films exposed to atomic axygen

    NASA Technical Reports Server (NTRS)

    Snyder, Paul G.; De, Bhola N.; Woollam, John A.; Coutts, T. J.; Li, X.

    1989-01-01

    A qualitative simulation of the effects of atomic oxygen has been conducted on indium tin oxide (ITO) films prepared by dc sputtering onto room-temperature substrates, by exposing them to an RF-excited oxygen plasma and characterizing the resulting changes in optical, electrical, and structural properties as functions of exposure time with ellipsometry, spectrophotometry, resistivity, and X-ray measurements. While the films thus exposed exhibit reduced resistivity and optical transmission; both of these effects, as well as partial crystallization of the films, may be due to sample heating by the plasma. Film resistivity is found to stabilize after a period of exposure.

  5. Cadmium-Tin Oxide Transparent Conductive Thin Films

    NASA Astrophysics Data System (ADS)

    Stapinski, T.; Leja, E.; Marszalek, K.

    1986-09-01

    Cadmium-tin oxide (CTO) films have been prepared by d.c. reactive sputtering of Cd-Sn alloy targets in Ar-02 gas mixture. The electrical, optical and structural properties as well as the chemical composition of transparent conducting CTO films were found to depend on sputtering conditions. The value of optical band gap, optical constants, effective mass and relaxation time of electrons have been determined.

  6. Nucleation and growth mechanisms in ion-plated TiN films on steel substrates

    SciTech Connect

    Erdemir, A.; Cheng, C.C.

    1989-01-01

    Cross-sectional transmission electron microscopy (XTEM) was used to investigate the nucleation and growth characteristics of TiN films, ion plated on tool and stainless steel substrates with and without an {alpha}-Ti underlayer ({approx}100 nm thick). It was found that (1) at lower deposition temperatures, the underlayer {alpha}-Ti remains unchanged and exhibits a layer + island growth mode; (2) at higher deposition temperatures, the underlayer may transform into a TiC phase on M50 steel and into a {delta}{prime}-TiN phase on 316L stainless steel; (3) the growth behavior of TiN films was controlled primarily by the reaction thermodynamics and diffusion kinetics of Ti and N adatoms. Based on microscopic evidence together with the kinetic and thermodynamic considerations a mechanistic model is presented to describe the nucleation and growth mechanisms of ion-plated TiN films under the deposition conditions explored in this study. 20 refs., 4 figs.

  7. Early stages of TiN thin film growth probed using in-situ soft X-ray absorption spectroscopy

    NASA Astrophysics Data System (ADS)

    Gupta, Rachana; Gupta, Mukul; Phase, D. M.

    2017-05-01

    In this work, we studied the growth behavior of TiN thin films prepared using a direct current magnetron sputtering (dcMS) process. First, we prepared a series of TiN thin films by varying the amount of reactive nitrogen gas flow (RN2) during sputtering. We find that such variation leads to a systematic increase in the number density of deposited film, confirming the formation of titanium mononitride (TiN) phase having orientation along (111) plane. We also observed that the deposition rate decreases significantly as RN2 increases. Recently, theoretical and experimental reports on TiN thin films suggested that the early stages of film growth can be different than those of thick films. In order to study the early stages of film growth we did in-situ N K-edge and Ti L-edge soft x-ray absorption (XAS) measurements. Our XAS measurements suggest that the hybridization of Ti and N orbitals is significantly different in the initial stages of film growth; characterized by a variation in the hybridization between unoccupied N 2p state with Ti 3d state. The origin of such behavior needs to investigated and could be due to a competitive grain growth taking along (001) and (111) direction in the early stages as suggested in theoretical calculations.

  8. SnS2 Thin Film Deposition by Spray Pyrolysis

    NASA Astrophysics Data System (ADS)

    Jaber, Abdallah Yahia; Alamri, Saleh Noaiman; Aida, Mohammed Salah

    2012-06-01

    Tin disulfide (SnS2) thin films have been synthesized using a simplified spray pyrolysis technique using a perfume atomizer. The films were deposited using two different solutions prepared by the dilution of SnCl2 and thiourea in distilled water and in methanol. The obtained films have a microcrystalline structure. The film deposited using methanol as the solvent is nearly stochiometric SnS2 with a spinel phase having a (001) preferential orientation. The film prepared with an aqueous solution is Sn-rich. Scanning electronic microscopy (SEM) images reveal that the film deposited with the aqueous solution is rough and is formed with large wires. However, the film deposited with methanol is dense and smooth. Conductivity measurements indicate that the aqueous solution leads to an n-type semiconductor, while methanol leads to a p-type semiconductor.

  9. Synthesis and characterization of copper antimony tin sulphide thin films for solar cell applications

    NASA Astrophysics Data System (ADS)

    Ali, N.; Hussain, A.; Ahmed, R.; Wan Shamsuri, W. N.; Fu, Y. Q.

    2016-12-01

    Low price thin film modules based on Copper antimony tin sulphide (CATS) are introduced for solar harvesting to compete for the already developed compound semiconductors. Here, CATS thin films were deposited on soda lime glass by thermal evaporation technique followed by a rapid thermal annealing in an argon atmosphere. From Our XRD analysis, it was revealed that the annealed samples were poly-crystalline and their crystallinity was improved with increasing annealing temperature. The constituent elements and their corresponding chemical states were identified using X-ray photoelectron spectroscopy. The obtained optical band gap of 1.4 eV for CATS thin film is found nearly equal to GaAs - one of the highly efficient thin film material for solar cell technology. Furthermore, our observed good optical absorbance and low transmittance for the annealed CATS thin films in the visible region of light spectrum assured the aptness of the CATS thin films for solar cell applications.

  10. Antimony-Doped Tin Oxide Thin Films Grown by Home Made Spray Pyrolysis Technique

    NASA Astrophysics Data System (ADS)

    Yusuf, Gbadebo; Babatola, Babatunde Keji; Ishola, Abdulahi Dimeji; Awodugba, Ayodeji O.; Solar cell Collaboration

    2016-03-01

    Transparent conducting antimony-doped tin oxide (ATO) films have been deposited on glass substrates by home made spray pyrolysis technique. The structural, electrical and optical properties of the ATO films have been investigated as a function of Sb-doping level and annealing temperature. The optimum target composition for high conductivity and low resistivity was found to be 20 wt. % SnSb2 + 90 wt. ATO. Under optimized deposition conditions of 450oC annealing temperature, electrical resistivity of 5.2×10-4 Ω -cm, sheet resistance of 16.4 Ω/sq, average optical transmittance of 86% in the visible range, and average optical band-gap of 3.34eV were obtained. The film deposited at lower annealing temperature shows a relatively rough, loosely bound slightly porous surface morphology while the film deposited at higher annealing temperature shows uniformly distributed grains of greater size. Keywords: Annealing, Doping, Homemade spray pyrolysis, Tin oxide, Resistivity

  11. Ovonic switching in tin selenide thin films. Ph.D. Thesis

    NASA Technical Reports Server (NTRS)

    Baxter, C. R.

    1974-01-01

    Amorphous tin selenide thin films which possess Ovonic switching properties were fabricated using vacuum deposition techniques. Results obtained indicate that memory type Ovonic switching does occur in these films the energy density required for switching from a high impedance to a low impedance state is dependent on the spacing between the electrodes of the device. The switching is also function of the magnitude of the applied voltage pulse. A completely automated computer controlled testing procedure was developed which allows precise control over the shape of the applied voltage switching pulse. A survey of previous experimental and theoretical work in the area of Ovonic switching is also presented.

  12. Nano-crystalline porous tin oxide film for carbon monoxide sensing

    NASA Technical Reports Server (NTRS)

    Liu, Chung-Chiun (Inventor); Savinell, Robert F. (Inventor); Jin, Zhihong (Inventor)

    2000-01-01

    A tin oxide sol is deposited on platinum electrodes (12) of a sensor (10). The sol is calcined at a temperature of 500 to 800.degree. C. to produce a thin film of tin oxide with a thickness of about 150 nm to 2 .mu. and having a nano-crystalline structure with good stability. The sensor rapidly detects reducing gases, such as carbon monoxide, or hydrocarbons and organic vapors. Sensors using films calcined at around 700.degree. C. have high carbon monoxide selectivity with a response time of around 4 minutes and a recovery time of 1 minute, and therefore provide good detection systems for detection of trace amounts of pollutants such as toxic and flammable gases in homes, industrial settings, and hospitals.

  13. Electrically conducting polyimide film containing tin complexes

    NASA Technical Reports Server (NTRS)

    St.clair, Anne K. (Inventor); Ezzell, Stephen A. (Inventor)

    1994-01-01

    Disclosed is a thermally-stable SnO2-surfaced polyimide film wherein the electrical conductivity of the SnO2 surface is within the range of about 3.0 x 10(exp -3) to about 1 x 10(exp -2) ohms(exp -1). Also disclosed is a method of preparing this film from a solution containing a polyamic acid and SnCl4 (DMSO)2.

  14. Electrically conducting polyimide film containing tin complexes

    NASA Technical Reports Server (NTRS)

    St. Clair, Anne K. (Inventor); Ezzell, Stephen A. (Inventor); Taylor, Larry T. (Inventor); Boston, Harold G. (Inventor)

    1996-01-01

    Disclosed is a thermally-stable SnO.sub.2 -surfaced polyimide film wherein the electrical conductivity of the SnO.sub.2 surface is within the range of about 3.0.times.10.sup.-3 to about 1.times.10.sup.-2 ohms.sup.-1,. Also disclosed is a method of preparing this film from a solution containing a polyamic acid and SnCl.sub.4 (DMSO).sub.2.

  15. Influence of annealing temperature and environment on the properties of indium tin oxide thin films

    NASA Astrophysics Data System (ADS)

    Wang, R. X.; Beling, C. D.; Fung, S.; Djurisic, A. B.; Ling, C. C.; Kwong, C.; Li, S.

    2005-06-01

    Indium tin oxide (ITO) thin films were deposited on glass substrates using the e-beam evaporating technique. The influence of deposition rate and post-deposition annealing on the optical properties of the films was investigated in detail. It is found that the deposition rate and annealing conditions strongly affect the optical properties of the films. The transmittance of films greatly increases with increasing annealing temperature below 300°C but drastically drops at 400°C when they are annealed in forming gas (mixed N2 and H2 gas). An interesting phenomenon observed is that the transmittance of the darkened film can recover under further 400°C annealing in air. Atomic force microscopy, x-ray diffraction and x-ray photoemission spectroscopy were employed to obtain information on the chemical state and crystallization of the films. Analysis of these data suggests that the loss and re-incorporating of oxygen are responsible for the reversible behaviour of the ITO thin films.

  16. Influence of gaseous annealing environment on the properties of indium-tin-oxide thin films

    NASA Astrophysics Data System (ADS)

    Wang, R. X.; Beling, C. D.; Fung, S.; Djurišić, A. B.; Ling, C. C.; Li, S.

    2005-02-01

    The influence of postannealing in different gaseous environments on the optical properties of indiu-tin-oxide (ITO) thin films deposited on glass substrates using e-beam evaporation has been systematically investigated. It is found that the annealing conditions affect the optical and electrical properties of the films. Atomic force microscopy, x-ray diffraction, and x-ray photoemission spectroscopy (XPS) were employed to obtain information on the chemical state and crystallization of the films. These data suggest that the chemical states and surface morphology of the ITO film are strongly influenced by the gaseous environment during the annealing process. The XPS data indicate that the observed variations in the optical transmittance can be explained by oxygen incorporation into the film, decomposition of the indium oxide phases, as well as the removal of metallic In.

  17. Controlled growth of antimony-doped tin dioxide thin films by atomic layer epitaxy

    NASA Astrophysics Data System (ADS)

    Viirola, H.; Niinistoe, L.

    1994-11-01

    Antimony-doped tin dioxide thin films were deposited on glass substrates by atomic layer epitaxy using SnCl4, SbCl5 and H2O as reactants. The growth experiments were carried out at 500 C. The effect of Sb doping on the growth rate, crystal texture and electrical and optical properties was studied. Spectrophotometry, secondary ion mass spectrometry, X-ray diffraction and electron spectroscopy for chemical analysis, as well as sheet resistance and Hall measurements were used to characterize the films. The films were highly uniform with only small thickness and sheet resistance variations. The films were polycrystalline with their crystallites having a preferred orientation, which depended on the Sb doping level and film thickness.

  18. High Mobility Thin Film Transistors Based on Amorphous Indium Zinc Tin Oxide.

    PubMed

    Noviyana, Imas; Lestari, Annisa Dwi; Putri, Maryane; Won, Mi-Sook; Bae, Jong-Seong; Heo, Young-Woo; Lee, Hee Young

    2017-06-26

    Top-contact bottom-gate thin film transistors (TFTs) with zinc-rich indium zinc tin oxide (IZTO) active layer were prepared at room temperature by radio frequency magnetron sputtering. Sintered ceramic target was prepared and used for deposition from oxide powder mixture having the molar ratio of In2O3:ZnO:SnO2 = 2:5:1. Annealing treatment was carried out for as-deposited films at various temperatures to investigate its effect on TFT performances. It was found that annealing treatment at 350 °C for 30 min in air atmosphere yielded the best result, with the high field effect mobility value of 34 cm2/Vs and the minimum subthreshold swing value of 0.12 V/dec. All IZTO thin films were amorphous, even after annealing treatment of up to 350 °C.

  19. High Mobility Thin Film Transistors Based on Amorphous Indium Zinc Tin Oxide

    PubMed Central

    Noviyana, Imas; Lestari, Annisa Dwi; Putri, Maryane; Won, Mi-Sook; Bae, Jong-Seong; Heo, Young-Woo; Lee, Hee Young

    2017-01-01

    Top-contact bottom-gate thin film transistors (TFTs) with zinc-rich indium zinc tin oxide (IZTO) active layer were prepared at room temperature by radio frequency magnetron sputtering. Sintered ceramic target was prepared and used for deposition from oxide powder mixture having the molar ratio of In2O3:ZnO:SnO2 = 2:5:1. Annealing treatment was carried out for as-deposited films at various temperatures to investigate its effect on TFT performances. It was found that annealing treatment at 350 °C for 30 min in air atmosphere yielded the best result, with the high field effect mobility value of 34 cm2/Vs and the minimum subthreshold swing value of 0.12 V/dec. All IZTO thin films were amorphous, even after annealing treatment of up to 350 °C. PMID:28773058

  20. Genesis of the Silsilah tin deposit, Kingdom of Saudi Arabia

    USGS Publications Warehouse

    Kamilli, Robert J.; Criss, R.E.

    1996-01-01

    The Silsilah tin deposit (lat 25 degrees 06' N, long 42 degrees 40' E) consists of a group of pervasively greisenized, flat-topped granite cupolas within a 12-km-diam ring complex. The greisens contain varying amounts of disseminated cassiterite and wolframite. Several types of quartz veins are peripheral to the greisens; some of these contain minor wolframite. The deposit is genetically associated with a highly differentiated, peraluminous alkali-feldspar granite (587 + or - 8 Ma) that is part of a mostly peralkaline, igneous ring complex intruded into Late Proterozoic, immature sandstones of the Murdama Group. We recognize four distinct phases of the peraluminous granite. Only the smallest, most highly differentiated cupolas contain significant tin greisen mineralization. Greisens developed beneath aplitic carapaces that overlie the granite and created impermeable barriers to rising volatiles. The geometry of a cupola correlates strongly with the intensity of alteration; cupolas with the smallest cross sectional areas and steepest marginal contacts have the most intensely greisenized apexes. The paragenetic sequence can be divided into five stages: pegmatite formation, locally pervasive albitization, locally pervasive greisenization and deposition of cassiterite, deposition of quartz-wolframite veins, and deposition of quartz veins with minor base metal sulfides. Pressure-corrected fluid inclusion filling temperatures indicate that the hydrothermal system generally cooled as it evolved and that the delta 18O values of the hydrothermal quartz increased from 10.8 to 15.7 per mil. Calculated delta 18O values of the hydrothermal fluid varied concomitantly from the pegmatite stage (delta 18O fluid approximately 8.6ppm; T [asymp] 550 degrees C) to the greisen stage (5.4 and 5.6[ppm; T [asymp] 360 degrees C), the quartz-wolframite vein stage (6.3 and 7.5ppm; T [asymp] 390 degrees C), and the late vein stage (4.0 and 5.1ppm; T [asymp] 270 degrees C). This evolution

  1. Highly conducting and crystalline doubly doped tin oxide films fabricated using a low-cost and simplified spray technique

    NASA Astrophysics Data System (ADS)

    Ravichandran, K.; Muruganantham, G.; Sakthivel, B.

    2009-11-01

    Doubly doped (simultaneous doping of antimony and fluorine) tin oxide films (SnO 2:Sb:F) have been fabricated by employing an inexpensive and simplified spray technique using perfume atomizer from aqueous solution of SnCl 2 precursor. The structural studies revealed that the films are highly crystalline in nature with preferential orientation along the (2 0 0) plane. It is found that the size of the crystallites of the doubly doped tin oxide films is larger (69 nm) than that (27 nm) of their undoped counterparts. The dislocation density of the doubly doped film is lesser (2.08×10 14 lines/m 2) when compared with that of the undoped film (13.2×10 14 lines/m 2), indicating the higher degree of crystallinity of the doubly doped films. The SEM images depict that the films are homogeneous and uniform. The optical transmittance in the visible range and the optical band gap of the doubly doped films are 71% and 3.56 eV respectively. The sheet resistance (4.13 Ω/□) attained for the doubly doped film in this study is lower than the values reported for spray deposited fluorine or antimony doped tin oxide films prepared from aqueous solution of SnCl 2 precursor (without using methanol or ethanol).

  2. Disordered surface structure of an ultra-thin tin oxide film on Rh(100)

    SciTech Connect

    Zenkyu, R.; Tajima, D.; Yuhara, J.

    2012-03-15

    The composition and structure of an ultra-thin tin oxide film on Rh(100), prepared by the deposition of a submonolayer of tin followed by annealing in an O{sub 2} atmosphere, were examined by a combination of low-energy electron diffraction (LEED), Auger electron spectroscopy, X-ray photoemission spectroscopy (XPS), scanning tunneling microscopy (STM), and ab initio calculations based on density functional theory (DFT). Although the LEED pattern exhibited c(2 x 8) spots clearly, a uniform periodicity of the c(2 x 8) unit cell was not observed in the STM images. The bright dots that were observed periodically in the STM image were similar to those of the ultra-thin Sn{sub 2}O{sub 3} film on Rh(111) and formed a zigzag arrangement with the numerous point and line defects. The XPS study revealed that the Sn 3d{sub 5/2} peak of the tin oxide film on Rh(100) showed a metallic state as well as an oxide state that was between the SnO{sub 2} and SnO states. The structural models, which were based on the Sn{sub 2}O{sub 3} structure on Rh(111), were determined using DFT total energy calculations. The simulated STM images of the two slightly different honeycomb-chain models well reproduced the zigzag arrangement in the STM image. The STM image and XPS spectrum were interpreted using a combination of the two models.

  3. Investigation of the Optoelectronic Properties of Ti-doped Indium Tin Oxide Thin Film

    PubMed Central

    Pu, Nen-Wen; Liu, Wei-Sheng; Cheng, Huai-Ming; Hu, Hung-Chun; Hsieh, Wei-Ting; Yu, Hau-Wei; Liang, Shih-Chang

    2015-01-01

    In this study, direct-current magnetron sputtering was used to fabricate Ti-doped indium tin oxide (ITO) thin films. The sputtering power during the 350-nm-thick thin-film production process was fixed at 100 W with substrate temperatures increasing from room temperature to 500 °C. The Ti-doped ITO thin films exhibited superior thin-film resistivity (1.5 × 10−4 Ω/cm), carrier concentration (4.1 × 1021 cm−3), carrier mobility (10 cm2/Vs), and mean visible-light transmittance (90%) at wavelengths of 400–800 nm at a deposition temperature of 400 °C. The superior carrier concentration of the Ti-doped ITO alloys (>1021 cm−3) with a high figure of merit (81.1 × 10−3 Ω−1) demonstrate the pronounced contribution of Ti doping, indicating their high suitability for application in optoelectronic devices. PMID:28793575

  4. Ion beam deposited protective films

    NASA Technical Reports Server (NTRS)

    Mirtich, M. J.

    1981-01-01

    Single or dual ion beam sources were used to deposit thin films for different applications. Metal and metal oxide films were evaluated as protective coatings for the materials. Film adherence was measured and the most promising films were then tested under environments similar to operating conditions. It was shown that some materials do protect die material (H-13 steel) and do reduce thermal fatigue. Diamondlike films have many useful applications. A series of experiments were conducted to define and optimize new approaches to the manufacture of such films. A dual beam system using argon and methane gases was developed to generate these films.

  5. Synthesizing photovoltaic thin films of high quality copper-zinc-tin alloy with at least one chalcogen species

    DOEpatents

    Teeter, Glenn; Du, Hui; Young, Matthew

    2013-08-06

    A method for synthesizing a thin film of copper, zinc, tin, and a chalcogen species ("CZTCh" or "CZTSS") with well-controlled properties. The method includes depositing a thin film of precursor materials, e.g., approximately stoichiometric amounts of copper (Cu), zinc (Zn), tin (Sn), and a chalcogen species (Ch). The method then involves re-crystallizing and grain growth at higher temperatures, e.g., between about 725 and 925 degrees K, and annealing the precursor film at relatively lower temperatures, e.g., between 600 and 650 degrees K. The processing of the precursor film takes place in the presence of a quasi-equilibrium vapor, e.g., Sn and chalcogen species. The quasi-equilibrium vapor is used to maintain the precursor film in a quasi-equilibrium condition to reduce and even prevent decomposition of the CZTCh and is provided at a rate to balance desorption fluxes of Sn and chalcogens.

  6. Effect of Nitrogen Content on Physical and Chemical Properties of TiN Thin Films Prepared by DC Magnetron Sputtering with Supported Discharge

    NASA Astrophysics Data System (ADS)

    Kavitha, A.; Kannan, R.; Gunasekhar, K. R.; Rajashabala, S.

    2017-06-01

    Amorphous titanium nitride (TiN) thin films have been prepared on silicon (Si) and glass substrates by direct-current (DC) reactive magnetron sputtering with a supported discharge (triode). Nitrogen gas (N2) at partial pressure of 0.3 Pa, 0.4 Pa, 0.5 Pa, and 0.6 Pa was used to prepare the TiN thin films, maintaining total pressure of argon and N2 of about 0.7 Pa. The chemical, microstructural, optical, and electrical properties of the TiN thin films were systematically studied. Presence of different phases of Ti with nitrogen (N), oxygen (O2), and carbon (C) elements was revealed by x-ray photoelectron spectroscopy characterization. Increase in the nitrogen pressure from 0.3 Pa to 0.6 Pa reduced the optical bandgap of the TiN thin film from 2.9 eV to 2.7 eV. Photoluminescence study showed that TiN thin film deposited at N2 partial pressure of 0.3 Pa exhibited three shoulder peaks at 330 nm, 335 nm, and 340 nm, which disappeared when the sample was deposited with N2 partial pressure of 0.6 Pa. Increase in the nitrogen content decreased the electrical resistivity of the TiN thin film from 3200 μΩ cm to 1800 μΩ cm. Atomic force microscopy studies of the TiN thin films deposited with N2 partial pressure of 0.6 Pa showed a uniform surface pattern associated with accumulation of fine grains. The results and advantages of this method of preparing TiN thin films are also reported.

  7. Effect of Nitrogen Content on Physical and Chemical Properties of TiN Thin Films Prepared by DC Magnetron Sputtering with Supported Discharge

    NASA Astrophysics Data System (ADS)

    Kavitha, A.; Kannan, R.; Gunasekhar, K. R.; Rajashabala, S.

    2017-10-01

    Amorphous titanium nitride (TiN) thin films have been prepared on silicon (Si) and glass substrates by direct-current (DC) reactive magnetron sputtering with a supported discharge (triode). Nitrogen gas (N2) at partial pressure of 0.3 Pa, 0.4 Pa, 0.5 Pa, and 0.6 Pa was used to prepare the TiN thin films, maintaining total pressure of argon and N2 of about 0.7 Pa. The chemical, microstructural, optical, and electrical properties of the TiN thin films were systematically studied. Presence of different phases of Ti with nitrogen (N), oxygen (O2), and carbon (C) elements was revealed by x-ray photoelectron spectroscopy characterization. Increase in the nitrogen pressure from 0.3 Pa to 0.6 Pa reduced the optical bandgap of the TiN thin film from 2.9 eV to 2.7 eV. Photoluminescence study showed that TiN thin film deposited at N2 partial pressure of 0.3 Pa exhibited three shoulder peaks at 330 nm, 335 nm, and 340 nm, which disappeared when the sample was deposited with N2 partial pressure of 0.6 Pa. Increase in the nitrogen content decreased the electrical resistivity of the TiN thin film from 3200 μΩ cm to 1800 μΩ cm. Atomic force microscopy studies of the TiN thin films deposited with N2 partial pressure of 0.6 Pa showed a uniform surface pattern associated with accumulation of fine grains. The results and advantages of this method of preparing TiN thin films are also reported.

  8. Device performances of organic light-emitting diodes with indium tin oxide, gallium zinc oxide, and indium zinc tin oxide anodes deposited at room temperature.

    PubMed

    Lee, Changhun; Ko, Yoonduk; Kim, Youngsung

    2013-12-01

    Thin films of Indium tin oxide (ITO), Gallium zinc oxide (GZO), and Indium zinc tin oxide (IZTO) were deposited on glass substrates by pulsed direct current magnetron sputtering at room temperature. The structural, optical, and electrical properties of the films were investigated towards evaluating their applications as flexible anodes. IZTO films exhibited the lowest resistivity (6.3 x 10(-4) Omega cm). Organic light-emitting diodes (OLEDs) were fabricated using the ITO, GZO, and IZTO films as anode layers. The turn-on voltages at a current density of 4.5 mA/cm2, 5.5 mA/cm2, 6.5 mA/cm2 were 5.5 V, 13.7 V, and 4.7 V for the devices with ITO, GZO, and IZTO anodes, respectively. The best performance was observed with the IZTO film, indicating its suitability as an alternative material for conventional ITO anodes used in OLEDs and flexible displays.

  9. Room temperature synthesis of indium tin oxide nanotubes with high precision wall thickness by electroless deposition

    PubMed Central

    Ionescu, Emanuel; Fu, Ganhua; Ensinger, Wolfgang

    2011-01-01

    Summary Conductive nanotubes consisting of indium tin oxide (ITO) were fabricated by electroless deposition using ion track etched polycarbonate templates. To produce nanotubes (NTs) with thin walls and small surface roughness, the tubes were generated by a multi-step procedure under aqueous conditions. The approach reported below yields open end nanotubes with well defined outer diameter and wall thickness. In the past, zinc oxide films were mostly preferred and were synthesized using electroless deposition based on aqueous solutions. All these methods previously developed, are not adaptable in the case of ITO nanotubes, even with modifications. In the present work, therefore, we investigated the necessary conditions for the growth of ITO-NTs to achieve a wall thickness of around 10 nm. In addition, the effects of pH and reductive concentrations for the formation of ITO-NTs are also discussed. PMID:21977422

  10. Room temperature synthesis of indium tin oxide nanotubes with high precision wall thickness by electroless deposition.

    PubMed

    Boehme, Mario; Ionescu, Emanuel; Fu, Ganhua; Ensinger, Wolfgang

    2011-01-01

    Conductive nanotubes consisting of indium tin oxide (ITO) were fabricated by electroless deposition using ion track etched polycarbonate templates. To produce nanotubes (NTs) with thin walls and small surface roughness, the tubes were generated by a multi-step procedure under aqueous conditions. The approach reported below yields open end nanotubes with well defined outer diameter and wall thickness. In the past, zinc oxide films were mostly preferred and were synthesized using electroless deposition based on aqueous solutions. All these methods previously developed, are not adaptable in the case of ITO nanotubes, even with modifications. In the present work, therefore, we investigated the necessary conditions for the growth of ITO-NTs to achieve a wall thickness of around 10 nm. In addition, the effects of pH and reductive concentrations for the formation of ITO-NTs are also discussed.

  11. Effect of solvent ratio on the optoelectronic properties of fluorine doped tin oxide thin films

    SciTech Connect

    Karthick, P.; Divya, V.; Sridharan, M.; Jeyadheepan, K.

    2015-06-24

    Fluorine doped tin oxide (FTO) thin films were deposited on to the well cleaned microscopic glass substrates using nebulized-spray pyrolysis (n-SP) technique by varying the water to ethanol solvent proportion. The deposited thin films were characterized by X-ray diffraction (XRD), UV-Vis-NIR spectroscopy, field emission scanning electron microscopy and Hall measurements to study the structural, optical, surface morphological and electrical properties of the films, respectively. Results of the analyzes show that the films are polycrystalline, having tetragonal structure with the preferred orientation along (110) plane. The grain size varies between 7 to 20 nm. The optimized films exhibit the optical transparency of 85 % at the wavelength of 580 nm. The optical bandgap lies in the range of 3.94 to 4 eV. The optimized films, deposited with 40 % of ethanol proportion are having the mean resistivity 4.72×10{sup −3} Ω-cm, carrier concentration 1.79×10{sup 20} cm{sup 3} and the mobility 7 cm{sup 2}/Vs.

  12. Optimisation of amorphous zinc tin oxide thin film transistors by remote-plasma reactive sputtering

    NASA Astrophysics Data System (ADS)

    Niang, K. M.; Cho, J.; Heffernan, S.; Milne, W. I.; Flewitt, A. J.

    2016-08-01

    The influence of the stoichiometry of amorphous zinc tin oxide (a-ZTO) thin films used as the semiconducting channel in thin film transistors (TFTs) is investigated. A-ZTO has been deposited using remote-plasma reactive sputtering from zinc:tin metal alloy targets with 10%, 33%, and 50% Sn at. %. Optimisations of thin films are performed by varying the oxygen flow, which is used as the reactive gas. The structural, optical, and electrical properties are investigated for the optimised films, which, after a post-deposition annealing at 500 °C in air, are also incorporated as the channel layer in TFTs. The optical band gap of a-ZTO films slightly increases from 3.5 to 3.8 eV with increasing tin content, with an average transmission ˜90% in the visible range. The surface roughness and crystallographic properties of the films are very similar before and after annealing. An a-ZTO TFT produced from the 10% Sn target shows a threshold voltage of 8 V, a switching ratio of 108, a sub-threshold slope of 0.55 V dec-1, and a field effect mobility of 15 cm2 V-1 s-1, which is a sharp increase from 0.8 cm2 V-1 s-1 obtained in a reference ZnO TFT. For TFTs produced from the 33% Sn target, the mobility is further increased to 21 cm2 V-1 s-1, but the sub-threshold slope is slightly deteriorated to 0.65 V dec-1. For TFTs produced from the 50% Sn target, the devices can no longer be switched off (i.e., there is no channel depletion). The effect of tin content on the TFT electrical performance is explained in the light of preferential sputtering encountered in reactive sputtering, which resulted in films sputtered from 10% and 33% Sn to be stoichiometrically close to the common Zn2SnO4 and ZnSnO3 phases.

  13. VACUUM DEPOSITION OF THIN FILMS,

    DTIC Science & Technology

    The book deals with methods of obtaining and processing thin films , methods of measuring the deposition rate and thickness of thin-film layers, and...the main fields of application of thin films . Vacuum requirements and the requirements for the composition of the residual medium in thermal...evaporation and cathode sputtering are given, and modern methods of producing and measuring vacuums and the equipment used in obtaining thin films are described. (Author)

  14. Hydrogen plasma treatment for improved conductivity in amorphous aluminum doped zinc tin oxide thin films

    SciTech Connect

    Morales-Masis, M. Ding, L.; Dauzou, F.; Jeangros, Q.; Hessler-Wyser, A.; Nicolay, S.; Ballif, C.

    2014-09-01

    Improving the conductivity of earth-abundant transparent conductive oxides (TCOs) remains an important challenge that will facilitate the replacement of indium-based TCOs. Here, we show that a hydrogen (H{sub 2})-plasma post-deposition treatment improves the conductivity of amorphous aluminum-doped zinc tin oxide while retaining its low optical absorption. We found that the H{sub 2}-plasma treatment performed at a substrate temperature of 50 °C reduces the resistivity of the films by 57% and increases the absorptance by only 2%. Additionally, the low substrate temperature delays the known formation of tin particles with the plasma and it allows the application of the process to temperature-sensitive substrates.

  15. Heteroepitaxial structures of SrTiO3/TiN on Si(100) by in situ pulsed laser deposition

    NASA Astrophysics Data System (ADS)

    Vispute, R. D.; Narayan, J.; Dovidenko, K.; Jagannadham, K.; Parikh, N.; Suvkhanov, A.; Budai, J. D.

    1996-12-01

    High-quality ceramics based heteroepitaxial structures of oxide-nitride-semiconductors, i.e., SrTiO3/TiN/Si(100) have been fabricated by in situ pulsed laser deposition. The dependence of substrate temperature and oxygen partial pressure on the crystalline quality of the SrTiO3 films on Si with epitaxial TiN template has been examined. We found that epitaxial growth occurs on TiN/Si(100) above 500 °C, initially at a reduced O2 pressure (10-6 Torr), and followed by a deposition in the range of 5-10×10-4 Torr. X-ray diffraction (Θ, ω, and Φ scans) and transmission electron microscope (TEM) results revealed an excellent alignment of SrTiO3 and TiN films on Si(100) with a cube-on-cube epitaxy. Rutherford backscattering and ion channeling results show a channeling minimum yield (χmin) of ˜13% for the SrTiO3 films. High-resolution TEM results on the SrTiO3/TiN interface show that the epitaxial SrTiO3 film is separated from the TiN by an uniform 80-90 Å crystalline interposing layer presumably of TiNxO1-x (oxy-nitride). The SrTiO3 film fabricated at 700 °C showed a high relative dielectric constant of 312 at the frequency of 1 MHz. The electrical resistivity and the breakdown field of the SrTiO3 films were more than 5×1012 Ω cm and 6×105 V cm-1, respectively. An estimated leakage current density measured at an electric field of 5×105 V/cm-1 was less than 10-7 A/cm2.

  16. Properties of ITO thin films deposited on amorphous and crystalline substrates with e-beam evaporation

    NASA Astrophysics Data System (ADS)

    Wang, R. X.; Beling, C. D.; Djurisic, A. B.; Li, S.; Fung, S.

    2004-06-01

    Indium tin oxide (ITO) thin films were deposited using the e-beam evaporation method on amorphous and crystalline substrates under identical conditions. The properties of the films were investigated using optical transmittance, XRD and XPS techniques. It was found that the properties of the films depend strongly on the nature of the substrate surface. Analysis suggests that changes in chemical composition and microstructure of the ITO films deposited on crystalline and amorphous substrates are responsible for the differences in optical properties.

  17. Anodization of Ti thin film deposited on ITO.

    PubMed

    Sadek, Abu Z; Zheng, Haidong; Latham, Kay; Wlodarski, Wojtek; Kalantar-Zadeh, Kourosh

    2009-01-06

    We have investigated several key aspects for the self-organization of nanotubes in RF sputtered titanium (Ti) thin films formed by the anodization process in fluoride-ion-containing neutral electrolytes. Ti films were deposited on indium tin oxide (ITO) glass substrates at room temperature and 300 degrees C, and then anodized. The films were studied using scanning electron microscopy (SEM), X-ray diffraction (XRD), and UV-vis spectrometry before and after anodization. It was observed that anodization of high temperature deposited films resulted in nanotube type structures with diameters in the range of 10-45 nm for an applied voltage of 5-20 V. In addition, the anatase form of TiO(2) is formed during the anodization process which is also confirmed using photocurrent measurements. However, the anodization of room temperature deposited Ti films resulted in irregular pores or holes.

  18. Amorphous nickel incorporated tin oxide thin film transistors

    NASA Astrophysics Data System (ADS)

    Yang, Jianwen; Ren, Jinhua; Lin, Dong; Han, Yanbing; Qu, Mingyue; Pi, Shubin; Fu, Ruofan; Zhang, Qun

    2017-09-01

    Nickel as a dopant has been proposed to suppress excess carrier concentration in n-type tin oxide based thin film transistors (TFTs). The influences of Ni content on nickel doped tin oxide (TNO) thin films and their corresponding TFTs were investigated with experimental results showing that the TNO thin films are amorphous. Through the comparison of the transfer characteristic curves of the TNO TFTs with different Ni contents, it was observed that Ni doping is useful to improve the performance of SnO2-based TFTs by suppressing the off-state current and shifting the threshold voltage to 0 V. The amorphous TNO TFT with 3.3 at.% Ni content shows optimum performance, with field effect mobility of 8.4 cm2 V-1 s-1, saturation mobility of 6.8 cm2 V-1 s-1, subthreshold swing value of 0.8 V/decade, and an on-off current ratio of 2.1  ×  107. Nevertheless, the bias stress stability of SnO2-based TFTs deteriorate.

  19. Characterization of reliability of printed indium tin oxide thin films.

    PubMed

    Hong, Sung-Jei; Kim, Jong-Woong; Jung, Seung-Boo

    2013-11-01

    Recently, decreasing the amount of indium (In) element in the indium tin oxide (ITO) used for transparent conductive oxide (TCO) thin film has become necessary for cost reduction. One possible approach to this problem is using printed ITO thin film instead of sputtered. Previous studies showed potential for printed ITO thin films as the TCO layer. However, nothing has been reported on the reliability of printed ITO thin films. Therefore, in this study, the reliability of printed ITO thin films was characterized. ITO nanoparticle ink was fabricated and printed onto a glass substrate followed by heating at 400 degrees C. After measurement of the initial values of sheet resistance and optical transmittance of the printed ITO thin films, their reliabilities were characterized with an isothermal-isohumidity test for 500 hours at 85 degrees C and 85% RH, a thermal shock test for 1,000 cycles between 125 degrees C and -40 degrees C, and a high temperature storage test for 500 hours at 125 degrees C. The same properties were investigated after the tests. Printed ITO thin films showed stable properties despite extremely thermal and humid conditions. Sheet resistances of the printed ITO thin films changed slightly from 435 omega/square to 735 omega/square 507 omega/square and 442 omega/square after the tests, respectively. Optical transmittances of the printed ITO thin films were slightly changed from 84.74% to 81.86%, 88.03% and 88.26% after the tests, respectively. These test results suggest the stability of printed ITO thin film despite extreme environments.

  20. Oxygen incorporation and charge donor activation via subplantation during growth of indium tin oxide films

    SciTech Connect

    Amassian, A.; Dudek, M.; Zabeida, O.; Gujrathi, S. C.; Klemberg-Sapieha, J. E.; Martinu, L.

    2009-03-15

    The use of plasma assistance is shown to enhance the optoelectronic properties (i.e., transparency, free carrier density, and conductivity) of indium tin oxide (ITO) deposited by reactive magnetron sputtering by promoting the incorporation of oxygen in substoichiometric oxide films during magnetron sputtering. The authors demonstrate that subplantation of oxygen ions (O{sub 2}{sup +} and O{sup +}), i.e., their implantation to depths of several nanometers below the growth surface, is the primary pathway by which radio frequency plasma assistance at the substrate surface enhances oxygen incorporation during reactive magnetron sputtering of ITO. These conclusions are supported independently by elastic recoil detection measurements of ITO films in the time-of-flight regime and Monte Carlo TRIDYN simulations of oxygen ion bombardment in the reactive low-pressure plasma environment. The findings indicate that subplantation plays a crucial role in improving the optoelectronic properties of O-deficient ITO films.

  1. Phase composition of gas sensitive thin films of tin oxide operating at near room temperature

    NASA Astrophysics Data System (ADS)

    Mahdi, O. S.; Malyar, I. V.; Zakharevich, A. M.; Smirnov, A. V.; Sinev, I. V.; Venig, S. B.

    2017-07-01

    We have studied the phase composition of thin polycrystalline tin oxide films deposited on silicon substrates by reactive RF magnetron sputtering. The films are sensitive to ethanol vapors at 38°C. They consist of SnO2 crystallites with the average grain size of about 7 nm, covered with a nanodimensional layer of amorphous SnO phase. It was found that the volume fraction of the former phase is about 95% and that of the latter phase is about 5%. Calculations of the film texture indicate the predominant growth of SnO2 crystals along 〈110〉, 〈211〉, and 〈310〉 crystal directions perpendicular to the substrate.

  2. Pulsed laser deposited indium tin oxides as alternatives to noble metals in the near-infrared region.

    PubMed

    Fang, Xu; Mak, C L; Zhang, Shiyu; Wang, Zhewei; Yuan, Wenjia; Ye, Hui

    2016-06-08

    Transparent conductive indium tin oxide thin films with thickness around 200 nm were deposited on glass substrates by pulsed laser deposition technology. The microstructure and the electrical and optical properties of the ITO films deposited under different oxygen pressures and substrate temperatures were systematically investigated. Distinct different x-ray diffraction patterns revealed that the crystallinity of ITO films was highly influenced by deposition conditions. The highest carrier concentration of the ITO films was obtained as 1.34  ×  10(21) cm(-3) with the lowest corresponding resistivity of 2.41  ×  10(-4) Ω cm. Spectroscopic ellipsometry was applied to retrieve the dielectric permittivity of the ITO films to estimate their potential as plasmonic materials in the near-infrared region. The crossover wavelength (the wavelength where the real part of the permittivity changes from positive to negative) of the ITO films exhibited high dependence on the deposition conditions and was optimized to as low as 1270 nm. Compared with noble metals (silver or gold etc), the lower imaginary part of the permittivity (<3) of ITO films suggests the potential application of ITO in the near-infrared range.

  3. Optical Properties of dual ion beam sputtered Indium Tin Oxide films on glass and Silicon

    NASA Astrophysics Data System (ADS)

    Simpson, Nelson; Geerts, Wilhelmus; Bandyopadhyay, Anup

    2012-03-01

    Indium Tin Oxide (ITO) is a transparent conducting material that finds application in flat panel displays, solar cells, and photodetectors. High quality ITO films, i.e. films with a large transparency and a high conductivity, are normally deposited above room temperature often at 300-400 C. This high deposition temperature eliminates most plastics as substrates. To lower the substrate deposition temperature we are applying atomic instead of molecular oxygen during the sputtering process. A dual ion beam sputtering system (DIBS) has been modified to allow the substrate to be exposed to an atomic oxygen beam at 45 degrees angle of incidence. Thin films were sputtered as a function of atomic oxygen flux and substrate temperature on glass, silicon, and sapphire substrates. The optical properties were measured by spectroscopic ellipsometry, reflectometry, and FTIR. Film thickness and bandgap were determined from the optical properties in the visible part of the spectrum. Mobility was determined from the infrared part of the spectruam. Optical properties appear to vary with the film thickness, the oxygen flux, and the substrate temperature. Roughness of the samples was independently measured by AFM. This work is supported by a grant from research corporation (10775).

  4. Synthesis of Tantalum-Doped Tin Oxide Thin Films by Magnetron Sputtering for Photovoltaic Applications

    NASA Astrophysics Data System (ADS)

    Nguyen, Ngoc Minh; Luu, Manh Quynh; Nguyen, Minh Hieu; Nguyen, Duy Thien; Bui, Van Diep; Truong, Thanh Tu; Pham, Van Thanh; Nguyen-Tran, Thuat

    2017-06-01

    Tantalum-doped tin oxide transparent conductive thin films were deposited on glass substrates by radio frequency and direct current reactive magnetron co-sputtering methods in an argon and oxygen environment. Optimization of the thin films for photovoltaic applications was performed using a dimensionless figure of merit by combining electrical and transparency properties. The optimized thin film showed a weight-averaged transmittance of 83%, a band gap value of 3.2 eV, resistivity of 5.2 × 10-3 Ω cm, and bulk carrier concentration of 1.2 × 1020 cm-3. The lowest resistivity among all films was 2.1 × 10-3 Ω cm, corresponding to a weight-averaged transmittance of 62%. The optimized deposition condition was carried out by co-sputtering on heated substrates at 270°C. Thin films deposited under this optimized condition were applied for our perovskite solar cells, and demonstrated promising power conversion efficiency.

  5. Synthesis of Tantalum-Doped Tin Oxide Thin Films by Magnetron Sputtering for Photovoltaic Applications

    NASA Astrophysics Data System (ADS)

    Nguyen, Ngoc Minh; Luu, Manh Quynh; Nguyen, Minh Hieu; Nguyen, Duy Thien; Bui, Van Diep; Truong, Thanh Tu; Pham, Van Thanh; Nguyen-Tran, Thuat

    2017-01-01

    Tantalum-doped tin oxide transparent conductive thin films were deposited on glass substrates by radio frequency and direct current reactive magnetron co-sputtering methods in an argon and oxygen environment. Optimization of the thin films for photovoltaic applications was performed using a dimensionless figure of merit by combining electrical and transparency properties. The optimized thin film showed a weight-averaged transmittance of 83%, a band gap value of 3.2 eV, resistivity of 5.2 × 10-3 Ω cm, and bulk carrier concentration of 1.2 × 1020 cm-3. The lowest resistivity among all films was 2.1 × 10-3 Ω cm, corresponding to a weight-averaged transmittance of 62%. The optimized deposition condition was carried out by co-sputtering on heated substrates at 270°C. Thin films deposited under this optimized condition were applied for our perovskite solar cells, and demonstrated promising power conversion efficiency.

  6. Synthesis, structure, and biocompatibility of pulsed laser-deposited TiN nanowires for implant applications.

    PubMed

    Faruque, Mainul K; Darkwa, Kwadwo M; Watson, Christa Y; Waterman, Jenora T; Kumar, Dhananjay

    2012-07-01

    A bottom-up based pulsed laser deposition technique has been used to grow titanium nitride (TiN) nanowires on single crystalline substrates. The first step of this method is the dissolution of laser ablated gaseous TiN material in the nanodimensional catalytic gold (Au) liquid islands located on the substrate surfaces. The continuous dissolution of TiN results in the supersaturation of liquid Au with TiN followed by extrusion of solid TiN material in the nanowire form at the liquid/solid interface. The growth of TiN nanowires continues as long as its dissolution rate into the catalyst Au matches the extrusion rate of solid TiN. This bottom-up approach gives rise to a one-dimensional TiN nanowire structures (length: 200-300 nm and diameter: 20-30 nm) capped with Au. The ascent of Au nanodots to the top of TiN nanowires can be explained based on breaking of weaker bonds and building of stronger bonds. The TiN nanowires are provided vertical alignment by selecting a plane of the substrate that provides the least lattice mismatching to the (111) plane of TiN which has lower surface energy than its other planes: (100) or (110). After the successful formation and structural characterization, a lactate dehydrogenase (LDH) release assay has been used to confirm the biocompatibility and cytotoxicity of these nanowires. Copyright © 2012 Wiley Periodicals, Inc.

  7. Highly stable amorphous zinc tin oxynitride thin film transistors under positive bias stress

    NASA Astrophysics Data System (ADS)

    Niang, K. M.; Bayer, B. C.; Meyer, J. C.; Flewitt, A. J.

    2017-09-01

    The stability of amorphous zinc tin oxynitride thin film transistors (a-ZTON TFTs) under positive bias stress (PBS) is investigated. Thin films are deposited by remote plasma reactive sputtering and are annealed at 300 °C in air for 1 h, after which films are confirmed to be highly amorphous by transmission electron microscopy. Typical a-ZTON TFTs exhibit a threshold voltage of 2.5 V, a field effect mobility of 3.3 cm2 V-1 s-1, a sub-threshold slope of 0.55 V dec-1, and a switching ratio over 106. Using a thermalization energy analysis, the threshold voltage shift under PBS is analysed. A maximum energy barrier to defect conversion up to 0.91 eV is found, which is significantly greater than that of the ˜0.75 eV energy barrier for amorphous indium gallium zinc oxide and amorphous zinc tin oxide TFTs previously reported. The improved stability of these oxynitride TFTs over amorphous oxide TFTs is explained by the elimination of less stable oxygen vacancies due to the passivation of oxygen vacancies with nitrogen. The higher attempt-to-escape frequency of 108 to 109 s-1 in a-ZTON TFTs compared with 107 s-1 in amorphous oxide semiconductor TFTs, on the other hand, is attributed to the high homogeneity of the amorphous film leading to strong carrier localization in the band tails.

  8. Modification of opto-electronic properties of ZnO by incorporating metallic tin for buffer layer in thin film solar cells

    SciTech Connect

    Deepu, D. R.; Jubimol, J.; Kartha, C. Sudha; Louis, Godfrey; Vijayakumar, K. P.; Kumar, K. Rajeev

    2015-06-24

    In this report, the effect of incorporation of metallic tin (Sn) on opto-electronic properties of ZnO thin films is presented. ZnO thin films were deposited through ‘automated chemical spray pyrolysis’ (CSP) technique; later different quantities of ‘Sn’ were evaporated on it and subsequently annealed. Vacuum annealing showed a positive effect on crystallinity of films. Creation of sub band gap levels due to ‘Sn’ diffusion was evident from the absorption and PL spectra. The tin incorporated films showed good photo response in visible region. Tin incorporated ZnO thin films seem to satisfy the desirable criteria for buffer layer in thin film solar cells.

  9. Antimony tin oxide (ATO) nanoparticle formation from H2O2 solutions: a new generic film coating from basic solutions.

    PubMed

    Sladkevich, Sergey; Mikhaylov, Alexey A; Prikhodchenko, Petr V; Tripol'skaya, Tatiana A; Lev, Ovadia

    2010-10-18

    A generic method for conductive film coating of minerals and acid-sensitive materials by antimony-doped tin oxide (ATO) is introduced. The coating was performed from a hydrogen peroxide stabilized stannate and antimonate precursor solution. This is the first demonstration of ATO coating from an organic ligand-free solution. Uniform coating of different clays and other irregular configurations by monosized 5 nm ATO particles was demonstrated. The deposition mechanism and the observed preference for mineral surface coating over homogeneous agglomeration of the tin oxide particles are explained by a hydrogen peroxide capping mechanism and hydrogen bonding of the hydroperoxo nanoparticles to the H(2)O(2)-activated mineral surfaces.

  10. Structural and optical characterisation of tin dioxide thin films by sol-gel dip coating technique

    NASA Astrophysics Data System (ADS)

    Lekshmy, S. Sujatha; Berlin, I. John; Maneeshya, L. V.; Anitha; Joy, K.

    2015-02-01

    Tin oxide (SnO2) thin films were deposited on quartz substrates using sol-gel dip coating technique. X-ray diffraction (XRD) pattern indicated that the film annealed in air at 350°C was amorphous in nature, whereas, the films annealed in oxygen atmosphere at 350°C showed crystalline phase. The films were further annealed in oxygen atmosphere at 450°C and 550°C. All the diffraction peaks can be indexed to the tetragonal phase of SnO2 The surface morphology (SEM) showed that surface of all films were continuous and without micro cracks. The Energy dispersive X-ray spectroscopy (EDXS) spectra indicated an increase in the concentration of oxygen content with increase in annealing temperature. The energy band gap value for the film annealed in air was 3.88 eV. The optical band gap increased to 4.05 eV when annealed in O2 atmosphere. The photoluminescence (PL) spectra showed the presence of emission peaks in UV region and visible region of the electromagnetic spectra. Transparent oxide semiconductor SnO2 film finds potential application as an active channel layer for transparent thin film transistor.

  11. High angular sensitivity thin film tin oxide sensor

    NASA Astrophysics Data System (ADS)

    Kaur, Davinder; Madaan, Divya; Sharma, V. K.; Kapoor, A.

    2016-05-01

    We present theoretical anlaysis of a thin film SnO2 (Tin Oxide) sensor for the measurement of variation in the refractive index of the bulk media. It is based on lossy mode resonance between the absorbing thin film lossy modes and the evanescent wave. Also the addition of low index dielectric matching layer between the prism and the lossy waveguiding layer future increase the angular sensitivity and produce an efficient refractive index sensor. The angular interrogation is done and obtained sensitivity is 110 degree/RIU. Theoretical analysis of the proposed sensor based on Fresnel reflection coefficients is presented. This enhanced sensitivity will further improve the monitoring of biomolecular interactions and the higher sensitivity of the proposed configurations makes it to be a much better option to be employed for biosensing applications.

  12. Thickness dependence of transport properties of doped polycrystalline tin oxide films

    SciTech Connect

    Belanger, D.; Dickson, J.I.; Dodelet, J.P.; Lombos, B.A.

    1985-06-01

    Tin oxide films were deposited by chemical vapor deposition on borosilicate and fused silica substrates using dibutyltin diacetate (DBTD) as tin feedstock and SbC/sub 5/ or CC/sub 3/-CF/sub 3/ as dopants. The film growth rate was measured as a function of dopant/DBTD ratio, temperature, and film thickness. Scanning electron microscopy and x-ray diffraction spectra of the films were used to determine the grain sizes and the preferential orientations of the crystallites in the film as a function of film thickness. Optical and electrical properties were measured. A model is proposed to elucidate the variation of transport properties of doped SnO/sub 2/ as a function of film thickness. It could b shown with this model that the thickness dependence of the conductivity of doped SnO/sub 2/:Sb and SnO/sub 2/:F films could be analyzed in terms of carrier concentration taking into consideration deep-level compensation. The number of carriers is decreased by electron trapping at Sb(III) or Sn(II) surface states when antimony or fluorine are used as dopant, respectively. The model based on results of the literature related to a single crystal with (110) orientation is extended in this work to other crystallite orientations. The present analysis indicates that deep levels appear only on the grain boundary surfaces with (110), (211), and (301) orientations, and not on the (200) and (400) ones. The concentration of free carriers can be calculated on the basis of x-ray diffraction spectra indicating an estimate of the relative fraction of the crystallites with each orientation as a function of the film thickness. The conductivities of the films can be computed using this model and taking a single value for the electron mobility of 19 cm/sup 2/ (V-s)/sup -1/ for all film thickness and a total donor concentration of 2 x 10/sup 20/ cm/sup -3/. All the obtained experimental data can be accounted for exclusively on the basis of film-thickness dependent carrier concentration.

  13. Influence of current density on surface morphology and properties of pulse plated tin films from citrate electrolyte

    NASA Astrophysics Data System (ADS)

    Sharma, Ashutosh; Bhattacharya, Sumit; Das, Siddhartha; Das, Karabi

    2014-01-01

    Bulk polycrystalline tin films have been processed by pulse electrodeposition technique from a simple solution containing triammonium citrate and stannous chloride. The cathodic investigations have been carried out by galvanostatic methods. As deposited samples are characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), and transmission electron microscopy (TEM). XRD analysis of the deposited films shows microcrystalline grains having β-Sn form. The surface morphology is very rough at lower current density, but becomes smooth at higher current density, and exhibits pyramid type morphology at all the current densities. The effect of current density on microhardness, melting behavior, and electrical resistivity are also reported here.

  14. Characteristics of layered tin disulfide deposited by atomic layer deposition with H2S annealing

    NASA Astrophysics Data System (ADS)

    Lee, Seungjin; Shin, Seokyoon; Ham, Giyul; Lee, Juhyun; Choi, Hyeongsu; Park, Hyunwoo; Jeon, Hyeongtag

    2017-04-01

    Tin disulfide (SnS2) has attracted much attention as a two-dimensional (2D) material. A high-quality, low-temperature process for producing 2D materials is required for future electronic devices. Here, we investigate tin disulfide (SnS2) layers deposited via atomic layer deposition (ALD) using tetrakis(dimethylamino)tin (TDMASn) as a Sn precursor and H2S gas as a sulfur source at low temperature (150° C). The crystallinity of SnS2 was improved by H2S gas annealing. We carried out H2S gas annealing at various conditions (250° C, 300° C, 350° C, and using a three-step method). Angle-resolved X-ray photoelectron spectroscopy (ARXPS) results revealed the valence state corresponding to Sn4+ and S2- in the SnS2 annealed with H2S gas. The SnS2 annealed with H2S gas had a hexagonal structure, as measured via X-ray diffraction (XRD) and the clearly out-of-plane (A1g) mode in Raman spectroscopy. The crystallinity of SnS2 was improved after H2S annealing and was confirmed using the XRD full-width at half-maximum (FWHM). In addition, high-resolution transmission electron microscopy (HR-TEM) images indicated a clear layered structure.

  15. Vapor deposition of thin films

    DOEpatents

    Smith, David C.; Pattillo, Stevan G.; Laia, Jr., Joseph R.; Sattelberger, Alfred P.

    1992-01-01

    A highly pure thin metal film having a nanocrystalline structure and a process of preparing such highly pure thin metal films of, e.g., rhodium, iridium, molybdenum, tungsten, rhenium, platinum, or palladium by plasma assisted chemical vapor deposition of, e.g., rhodium(allyl).sub.3, iridium(allyl).sub.3, molybdenum(allyl).sub.4, tungsten(allyl).sub.4, rhenium(allyl).sub.4, platinum(allyl).sub.2, or palladium(allyl).sub.2 are disclosed. Additionally, a general process of reducing the carbon content of a metallic film prepared from one or more organometallic precursor compounds by plasma assisted chemical vapor deposition is disclosed.

  16. The effect of the annealing temperature on the transition from conductor to semiconductor behavior in zinc tin oxide deposited atomic layer deposition

    SciTech Connect

    Ahn, Byung Du; Choi, Dong-won Choi, Changhwan; Park, Jin-Seong

    2014-09-01

    We investigated the electrical properties of zinc tin oxide (ZTO) films deposited via atomic layer deposition and compared them to ZnO and SnO{sub 2} films as a function of the annealing temperature. The ZTO and ZnO, except for SnO{sub 2}, films exhibited an electrical transition from a metal to semiconductor characteristics when annealed above 300 °C. The X-ray photoelectron spectroscopy analyses indicate that the relative area of the oxygen vacancy-related peak decreased from 58% to 41% when annealing at temperatures above 400 °C. Thin film transistors incorporating ZTO active layers demonstrated a mobility of 13.2 cm{sup 2}/V s and a negative bias instability of −0.2 V.

  17. A novel synthesis of tin oxide thin films by the sol-gel process for optoelectronic applications

    SciTech Connect

    Marikkannan, M.; Vishnukanthan, V.; Vijayshankar, A.; Mayandi, J.; Pearce, J. M.

    2015-02-15

    A novel and simple chemical method based on sol-gel processing was proposed to deposit metastable orthorhombic tin oxide (SnOx) thin films on glass substrates at room temperature. The resultant samples are labeled according to the solvents used: ethanol (SnO-EtOH), isopropanol (SnO-IPA) and methanol (SnO-MeOH). The variations in the structural, morphological and optical properties of the thin films deposited using different solvents were characterized by X-ray diffraction, atomic force microscopy, Raman spectroscopy, Fourier transform infrared (FTIR) spectroscopy, UV-vis spectroscopy and photoluminescence (PL) analysis. The XRD patterns confirm that all the films, irrespective of the solvents used for preparation, were polycrystalline in nature and contained a mixed phases of tin (II) oxide and tin (IV) oxide in a metastable orthorhombic crystal structure. FTIR spectra confirmed the presence of Sn=O and Sn-O in all of the samples. PL spectra showed a violet emission band centered at 380 nm (3.25 eV) for all of the solvents. The UV-vis spectra indicated a maximum absorption band shown at 332 nm and the highest average transmittance around 97% was observed for the SnO-IPA and SnO-MeOH thin film samples. The AFM results show variations in the grain size with solvent. The structural and optical properties of the SnO thin films indicate that this method of fabricating tin oxide is promising and that future work is warranted to analyze the electrical properties of the films in order to determine the viability of these films for various transparent conducting oxide applications.

  18. Synthesis and Properties of Tin Sulfide Thin Films from Nanocolloids Prepared by Pulsed Laser Ablation in Liquid.

    PubMed

    Johny, Jacob; Sepulveda-Guzman, Selene; Krishnan, Bindu; Avellaneda, David A; Aguilar Martinez, Josue A; Shaji, Sadasivan

    2016-12-15

    Tin sulfide (SnS) nanoparticles were synthesized by pulsed laser ablation in liquid (PLAL) technique using an Nd:YAG laser operated at 532 nm. SnS thin films were deposited by spraying the colloidal suspension onto the heated substrates. The influence of different liquid media (dimethyl formamide and isopropyl alcohol) on the thin film properties were studied. Morphology, crystalline structure, and chemical composition of the nanoparticles were identified using transmission electron microscopy with energy dispersive X-ray analysis. The crystalline structure of the thin films was analyzed by using grazing incidence X-ray diffraction, and the chemical states by X-ray photoelectron spectroscopy. Scanning electron microscopy was employed for the morphological analysis of the thin films. Annealing the films at 380 °C improved the crystallinity of the films exhibiting a layered morphology, which may be useful in optoelectronic and sensing applications. Cyclic voltammetry studies showed that the films have good electrochemical properties.

  19. Temperature dependence of inductively coupled plasma assisted growth of TiN thin films.

    SciTech Connect

    Meng, W. J.; Curtis, T. J.; Rehn, L. E.; Baldo, P. M.; Materials Science Division; Louisiana State Univ.

    1999-11-01

    The use of low pressure high density plasmas to assist the synthesis of ceramic thin film materials is in its infancy. Using an inductively coupled plasma assisted magnetron sputtering system, we examine the dependence of plasma-assisted growth of TiN thin films on growth temperature at different ratios of ion flux to neutral atom flux. Our results indicate that a temperature independent densification of TiN films occurs above a certain ion to neutral atom flux ratio. As an example of this temperature independent densification, we demonstrate the formation of dense B1 TiN crystalline thin films at growth temperatures down to {approx}100 K.

  20. Analysis of Chlorine Ions in Antimony-Doped Tin Oxide Thin Film Using Synchrotron Grazing Incidence X-ray Diffraction

    NASA Astrophysics Data System (ADS)

    Lin, Yang-Yi; Wu, Albert T.; Ku, Ching-Shun; Lee, Hsin-Yi

    2012-10-01

    Antimony-doped tin oxide (SnO2:Sb, ATO) films have been deposited on glass substrates using atmospheric pressure chemical vapor deposition (APCVD) method. The precursors are mixed with SnCl4, SbCl5, and O2 to prepare the films. This study used synchrotron grazing incidence X-ray diffraction (GIXRD) to investigate the film microstructure. Our results show that the precursors of chlorine ions were involved in the doping mechanism, causing the microstructure of films to change slightly. The film has an average transmittance between 85.8 and 82.1% within a visible spectral range from 400 to 800 nm. The minimal resistivity was 6.1×10-4 Ω cm after doping. The synchrotron GIXRD data show that the chlorine ions caused the lattice constant change. A possible mechanism was proposed to explain the enhancement in electrical property due to chlorine dopants.

  1. Influence of the triethanolamine concentration on the optical properties of tin sulphide thin films by the Photothermal Deflection Spectroscopy

    NASA Astrophysics Data System (ADS)

    Gaied, I.; Akkari, A.; Yacoubi, N.; Kamoun, N.

    2010-03-01

    The optical properties of Tin sulphide thin films grown on a glass substrate by chemical bath deposition were investigated by the Photothermal Deflection Spectroscopy. The experimental normalised amplitude curves of the photothermal signal versus wavelength are compared to the corresponding theoretical ones versus optical absorption coefficient in order to determine the optical absorption spectrum. Then using the Tauc law, one can deduce the energy gap. The influence of the triethanolamine concentration (TEA) in the solution bath on the optical properties was successfully studied.

  2. Deposited films with improved microstructures

    DOEpatents

    Patten, James W.; Moss, Ronald W.; McClanahan, Edwin D.

    1984-01-01

    Methods for improving microstructures of line-of-sight deposited films are described. Columnar growth defects ordinarily produced by geometrical shadowing during deposition of such films are eliminated without resorting to post-deposition thermal or mechanical treatments. The native, as-deposited coating qualities, including homogeneity, fine grain size, and high coating-to-substrate adherence, can thus be retained. The preferred method includes the steps of emitting material from a source toward a substrate to deposit a coating non-uniformly on the substrate surface, removing a portion of the coating uniformly over the surface, again depositing material onto the surface, but from a different direction, and repeating the foregoing steps. The quality of line-of-sight deposited films such as those produced by sputtering, progressively deteriorates as the angle of incidence between the flux and the surface becomes increasingly acute. Depositing non-uniformly, so that the coating becomes progressively thinner as quality deteriorates, followed by uniformly removing some of the coating, such as by resputtering, eliminates the poor quality portions, leaving only high quality portions of the coating. Subsequently sputtering from a different direction applies a high quality coating to other regions of the surface. Such steps can be performed either simultaneously or sequentially to apply coatings of a uniformly high quality, closed microstructure to three-dimensional or large planar surfaces.

  3. Thickness Influence on In Vitro Biocompatibility of Titanium Nitride Thin Films Synthesized by Pulsed Laser Deposition

    PubMed Central

    Duta, Liviu; Stan, George E.; Popa, Adrian C.; Husanu, Marius A.; Moga, Sorin; Socol, Marcela; Zgura, Irina; Miculescu, Florin; Urzica, Iuliana; Popescu, Andrei C.; Mihailescu, Ion N.

    2016-01-01

    We report a study on the biocompatibility vs. thickness in the case of titanium nitride (TiN) films synthesized on 410 medical grade stainless steel substrates by pulsed laser deposition. The films were grown in a nitrogen atmosphere, and their in vitro cytotoxicity was assessed according to ISO 10993-5 [1]. Extensive physical-chemical analyses have been carried out on the deposited structures with various thicknesses in order to explain the differences in biological behavior: profilometry, scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy (XPS), X-ray diffraction and surface energy measurements. XPS revealed the presence of titanium oxynitride beside TiN in amounts that vary with the film thickness. The cytocompatibility of films seems to be influenced by their TiN surface content. The thinner films seem to be more suitable for medical applications, due to the combined high values of bonding strength and superior cytocompatibility. PMID:28787846

  4. Thickness Influence on In Vitro Biocompatibility of Titanium Nitride Thin Films Synthesized by Pulsed Laser Deposition.

    PubMed

    Duta, Liviu; Stan, George E; Popa, Adrian C; Husanu, Marius A; Moga, Sorin; Socol, Marcela; Zgura, Irina; Miculescu, Florin; Urzica, Iuliana; Popescu, Andrei C; Mihailescu, Ion N

    2016-01-13

    We report a study on the biocompatibility vs. thickness in the case of titanium nitride (TiN) films synthesized on 410 medical grade stainless steel substrates by pulsed laser deposition. The films were grown in a nitrogen atmosphere, and their in vitro cytotoxicity was assessed according to ISO 10993-5 [1]. Extensive physical-chemical analyses have been carried out on the deposited structures with various thicknesses in order to explain the differences in biological behavior: profilometry, scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy (XPS), X-ray diffraction and surface energy measurements. XPS revealed the presence of titanium oxynitride beside TiN in amounts that vary with the film thickness. The cytocompatibility of films seems to be influenced by their TiN surface content. The thinner films seem to be more suitable for medical applications, due to the combined high values of bonding strength and superior cytocompatibility.

  5. Crack density and electrical resistance in indium-tin-oxide/polymer thin films under cyclic loading

    NASA Astrophysics Data System (ADS)

    Mora, Angel; Khan, Kamran A.; El Sayed, Tamer

    2014-11-01

    Here, we propose a damage model that describes the degradation of the material properties of indium-tin-oxide (ITO) thin films deposited on polymer substrates under cyclic loading. We base this model on our earlier tensile test model and show that the new model is suitable for cyclic loading. After calibration with experimental data, we are able to capture the stress-strain behavior and changes in electrical resistance of ITO thin films. We are also able to predict the crack density using calibrations from our previous model. Finally, we demonstrate the capabilities of our model based on simulations using material properties reported in the literature. Our model is implemented in the commercially available finite element software ABAQUS using a user subroutine UMAT. [Figure not available: see fulltext.

  6. The electronic structure of co-sputtered zinc indium tin oxide thin films

    SciTech Connect

    Carreras, Paz; Antony, Aldrin; Bertomeu, Joan; Gutmann, Sebastian; Schlaf, Rudy

    2011-10-01

    Zinc indium tin oxide (ZITO) transparent conductive oxide layers were deposited via radio frequency (RF) magnetron co-sputtering at room temperature. A series of samples with gradually varying zinc content was investigated. The samples were characterized with x-ray and ultraviolet photoemission spectroscopy (XPS, UPS) to determine the electronic structure of the surface. Valence and conduction bands maxima (VBM, CBM), and work function were determined. The experiments indicate that increasing Zn content results in films with a higher defect rate at the surface leading to the formation of a degenerately doped surface layer if the Zn content surpasses {approx}50%. Furthermore, the experiments demonstrate that ZITO is susceptible to ultraviolet light induced work function reduction, similar to what was earlier observed on ITO and TiO{sub 2} films.

  7. Non-aqueous electrodeposition of porous tin-based film as an anode for lithium-ion battery

    NASA Astrophysics Data System (ADS)

    Gu, C. D.; Mai, Y. J.; Zhou, J. P.; You, Y. H.; Tu, J. P.

    2012-09-01

    Porous tin-based films are electrodeposited on copper foils from a choline chloride/ethylene glycol based electrolyte containing SnCl2·2H2O without any complexing agent or additive. Increasing the deposition time and voltage produces thicker films. The initially deposited Sn grains are relatively uniform with an average size of 200-300 nm and a kind of self-assembly distribution constructing an open and bicontinuous porous network. The architecture of these films possesses a double-layer structure, i.e. SnO2 (superficial layer)/Sn-Cu alloy (bottom layer), which is revealed by X-ray diffractometer and X-ray photoelectron spectroscopy. The electrochemical performance of the porous tin-based films as anode for lithium-ion batteries is measured. Although the capacity fades gradually with repeated cycling, a reversible capacity of 300-350 mAh g-1 is maintained for more than 50 cycles, which suggests that the in situ formed Sn--Cu alloy could provide an interlocking interface between active materials and current collector. Therefore, the tin's shedding from the current collector can be restrained. Moreover, the inactive materials, such as the oxide in the superficial layer and the Cu in the bottom layer, could also act as buffers to relieve the induced volume expansion of Sn during the repeated lithiathion/delithiation process, thus giving the good cycle performances.

  8. Influence of indium-tin-oxide thin-film quality on reverse leakage current of indium-tin-oxide/n-GaN Schottky contacts

    NASA Astrophysics Data System (ADS)

    Wang, R. X.; Xu, S. J.; Djurišić, A. B.; Beling, C. D.; Cheung, C. K.; Cheung, C. H.; Fung, S.; Zhao, D. G.; Yang, H.; Tao, X. M.

    2006-07-01

    Indium-tin-oxide (ITO)/n-GaN Schottky contacts were prepared by e-beam evaporation at 200°C under various partial pressures of oxygen. X-ray photoemission spectroscopy and positron beam measurements were employed to obtain chemical and structural information of the deposited ITO films. The results indicated that the observed variation in the reverse leakage current of the Schottky contact and the optical transmittance of the ITO films were strongly dependent on the quality of the ITO film. The high concentration of point defects at the ITO-GaN interface is suggested to be responsible for the large observed leakage current of the ITO/n-GaN Schottky contacts.

  9. Defects evolution and their impacts on conductivity of indium tin oxide thin films upon thermal treatment

    SciTech Connect

    Li, Qichao; Mao, Wenfeng; Zhou, Yawei; Yang, Chunhong; Liu, Yong; He, Chunqing

    2015-07-14

    Indium tin oxide (ITO) thin films were deposited on silicon substrates by radio-frequency magnetron sputtering. The influence of annealing temperature on the crystallite, surface morphology, defects evolution, and electrical property of the thin films was studied. The conductivity of the ITO films was significantly enhanced by two orders of magnitude by increasing the annealing temperature up to 600 °C, which was interpreted in point view of defects evolution in ITO films as revealed by positron annihilation. It was interesting to find that positron diffusion length was amazingly comparable to crystallite size in ITO films annealed below 300 °C, indicating positrons were preferentially localized and annihilated in defects around crystallite boundaries. By further increasing the temperature, positron diffusion length was far beyond the grain size with little increment. This demonstrated that defects were effectively removed around grain boundaries. The results indicated defect structure around crystallite/grain boundaries played an important role on carrier transportation in nanocrystal ITO films.

  10. A study on the high temperature-dependence of the electrical properties in a solution-deposited zinc-tin-oxide thin-film transistor operated in the saturation region

    NASA Astrophysics Data System (ADS)

    Yu, Kyeong Min; Bae, Byung Seong; Jung, Myunghee; Yun, Eui-Jung

    2016-06-01

    We investigate the effects of high temperatures in the range of 292 - 393 K on the electrical properties of solution-processed amorphous zinc-tin-oxide (a-ZTO) thin-film transistors (TFTs) operated in the saturation region. The fabricated a-ZTO TFTs have a non-patterned bottom gate and top contact structure, and they use a heavily-doped Si wafer and SiO2 as a gate electrode and a gate insulator layer, respectively. In a-ZTO TFTs, the trap release energy ( E TR ) was deduced by using Maxwell-Boltzmann statistics. The decreasing E TR toward zero with increasing gate voltage (the density of trap states ( n s )) in the a-ZTO active layer can be attributed to a shift of the Fermi level toward the mobility edge with increasing gate voltage. The TFTs with low gate voltage (low n s ) exhibit multiple trap and release characteristics and show thermally-activated behavior. In TFTs with a high gate voltage (high n s ), however, we observe decreasing mobility and conductivity with increasing temperature at temperatures ranging from 303 to 363 K. This confirms that the E TR can drop to zero, indicating a shift of the Fermi level beyond the mobility edge. Hence, the mobility edge is detected at the cusp between thermally-activated transport and band transport.

  11. Improved conductivity of indium-tin-oxide film through the introduction of intermediate layer

    NASA Astrophysics Data System (ADS)

    Ng, S. W.; Yam, F. K.; Beh, K. P.; Tneh, S. S.; Hassan, Z.

    2016-09-01

    A thin intermediate layer (Ag, AuSn, In, Ni, Sn, SiO2) was individually deposited on glass substrates prior to the deposition of indium-tin-oxide (ITO) thin film by radio-frequency (RF) magnetron sputtering employing ITO target (composition ratio of In2O3:SnO2 = 9:1). The structural, optical and electrical properties were investigated to compare the ITO thin film with and without an intermediate layer. The preferential orientation of all ITO films was along (222) plane. Although all thin films were polycrystalline, the presence of intermediate layer promoted the overall crystallinity. The sheet resistance and resistivity of the ITO film were reduced from ∼68 Ω/□ to ∼29-45 Ω/□, and 16.2 × 10-4 Ω cm up to 7.58 × 10-4 Ω cm, respectively, by inserting a thin metal layer underneath the ITO film, and it is dependent on the degree of crystallization. The optical transmittance in the visible region varies from 40 to 88% for different samples. Based on the evaluation from Tauc plot, the optical band gap falls in the range of 4.02-4.12 eV. Physical film thickness was compared with that evaluated by optical measurement in the visible range and the physical thickness was found to be smaller. Similarly, the carrier concentration/scattering time from Hall effect measurement were also compared with that from optical measurement in the infrared region. Haacke's figure of merit (FOM) was employed to assess the quality of the ITO films, and the highest FOM is credited to ITO/In up to ∼8 × 10-3 Ω-1 in the visible light region.

  12. Effect of thickness on electrical properties of SILAR deposited SnS thin films

    NASA Astrophysics Data System (ADS)

    Akaltun, Yunus; Astam, Aykut; Cerhan, Asena; ćayir, Tuba

    2016-03-01

    Tin sulfide (SnS) thin films of different thickness were prepared on glass substrates by successive ionic layer adsorption and reaction (SILAR) method at room temperature using tin (II) chloride and sodium sulfide aqueous solutions. The thicknesses of the films were determined using spectroscopic ellipsometry measurements and found to be 47.2, 65.8, 111.0, and 128.7nm for 20, 25, 30 and 35 deposition cycles respectively. The electrical properties of the films were investigated using d.c. two-point probe method at room temperature and the results showed that the resistivity was found to decrease with increasing film thickness.

  13. Influence of high power impulse magnetron sputtering plasma ionization on the microstructure of TiN thin films

    NASA Astrophysics Data System (ADS)

    Ehiasarian, A. P.; Vetushka, A.; Gonzalvo, Y. Aranda; Sáfrán, G.; Székely, L.; Barna, P. B.

    2011-05-01

    HIPIMS (High Power Impulse Magnetron Sputtering) discharge is a new PVD technology for the deposition of high-quality thin films. The deposition flux contains a high degree of metal ionization and nitrogen dissociation. The microstructure of HIPIMS-deposited nitride films is denser compared to conventional sputter technologies. However, the mechanisms acting on the microstructure, texture and properties have not been discussed in detail so far. In this study, the growth of TiN by HIPIMS of Ti in mixed Ar and N2 atmosphere has been investigated. Varying degrees of metal ionization and nitrogen dissociation were produced by increasing the peak discharge current (Id) from 5 to 30 A. The average power was maintained constant by adjusting the frequency. Mass spectrometry measurements of the deposition flux revealed a high content of ionized film-forming species, such as Ti1+, Ti2+ and atomic nitrogen N1+. Ti1+ ions with energies up to 50 eV were detected during the pulse with reducing energy in the pulse-off times. Langmuir probe measurements showed that the peak plasma density during the pulse was 3 × 1016 m-3. Plasma density, and ion flux ratios of N1+: N21+ and Ti1+: Ti0 increased linearly with peak current. The ratios exceeded 1 at 30 A. TiN films deposited by HIPIMS were analyzed by X-ray diffraction, and transmission electron microscopy. At high Id, N1+: N21+> 1 and Ti1+: Ti0> 1 were produced; a strong 002 texture was present and column boundaries in the films were atomically tight. As Id reduced and N1+: N21+ and Ti1+: Ti0 dropped below 1, the film texture switched to strong 111 with a dense structure. At very low Id, porosity between columns developed. The effects of the significant activation of the deposition flux observed in the HIPIMS discharge on the film texture, microstructure, morphology and properties are discussed.

  14. Deposition of diamondlike carbon films

    NASA Technical Reports Server (NTRS)

    Mirtich, M. J.; Sovey, J. S.; Banks, B. A. (Inventor)

    1984-01-01

    A diamondlike carbon film is deposited in the surface of a substrate by exposing the surface to an argon ion beam containing a hydrocarbon. The current density in the ion beam is low during initial deposition of the film. Subsequent to this initial low current condition, the ion beam is increased to full power. At the same time, a second argon ion beam is directed toward the surface of the substrate. The second ion beam has an energy level much greater than that of the ion beam containing the hydrocarbon. This addition of energy to the system increases mobility of the condensing atoms and serves to remove lesser bound atoms.

  15. Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition

    SciTech Connect

    Hägglund, Carl; Grehl, Thomas; Brongersma, Hidde H.; Tanskanen, Jukka T.; Mullings, Marja N.; Mackus, Adriaan J. M.; MacIsaac, Callisto; Bent, Stacey Francine; Yee, Ye Sheng; Clemens, Bruce M.

    2016-03-15

    A broad and expanding range of materials can be produced by atomic layer deposition at relatively low temperatures, including both oxides and metals. For many applications of interest, however, it is desirable to grow more tailored and complex materials such as semiconductors with a certain doping, mixed oxides, and metallic alloys. How well such mixed materials can be accomplished with atomic layer deposition requires knowledge of the conditions under which the resulting films will be mixed, solid solutions, or laminated. The growth and lamination of zinc oxide and tin oxide is studied here by means of the extremely surface sensitive technique of low energy ion scattering, combined with bulk composition and thickness determination, and x-ray diffraction. At the low temperatures used for deposition (150 °C), there is little evidence for atomic scale mixing even with the smallest possible bilayer period, and instead a morphology with small ZnO inclusions in a SnO{sub x} matrix is deduced. Postannealing of such laminates above 400 °C however produces a stable surface phase with a 30% increased density. From the surface stoichiometry, this is likely the inverted spinel of zinc stannate, Zn{sub 2}SnO{sub 4}. Annealing to 800 °C results in films containing crystalline Zn{sub 2}SnO{sub 4}, or multilayered films of crystalline ZnO, Zn{sub 2}SnO{sub 4}, and SnO{sub 2} phases, depending on the bilayer period.

  16. Mineralogy of the Santa Fe Tin deposit, Bolivia

    NASA Astrophysics Data System (ADS)

    Jiménez-Franco, Abigail; Alfonso, Pura; Canet, Carles; Garcia-Valles, Maite; Elvys Trujillo, Juan

    2014-05-01

    Santa Fe is a Sn-Zn-Pb-Ag ore deposit located in the Oruro district, Central Andean Tin Belt, Bolivia. Mineralization occurs in veins and disseminations. It is hosted in Silurian shales and greywackes. The sedimentary sequence is folded and unconformably covered by a volcanic complex of the Morococala Formation, mainly constituted by tuffs of Miocene age. A wide Nº40 shear zone and two systems of fracture are developed. A Nº40 fracture system, dipping 60ºW, which hosts Sn and Zn minerals, and other in the same direction but dipping 75ºE, which is related to Zn-Pb-Ag veins. The mineralization is associated to intrusive felsic magmatism. Although there are not intrusive rocks in Santa Fe, a dyke and the felsic San Pablo stock occur at a distance of about 10 km. In the present work we describe the geology and mineralogy of the Santa Fe deposit. X-ray diffraction, scanning electron microscopy and electron microprobe analyses were used to characterize the minerals. Veins are filled with quartz and an ore mineral assemblage of cassiterite, sulfides and sulfosalts. Cassiterite constitutes the earliest formed mineralization. Preliminar microprobe analyses indicate that it is nearly pure, with negligible contents in Nb and Ta. Rutile occurs as a late phase associated with a late generation of cassiterite. It forms thin neddle-like crystals. In addition, Sn is also present in sulfides as stannite, stannoidite and kësterite. Other sulfides are pyrrhotite, pyrite, arsenopyrite, galena, sphalerite, marchasite and argentite. Bismuthinite and berndite are found nin trace amounts. Sulfosalts include tetrahedrite, myarhyrite, boulangerite, jamesonite, franckeite, zinckenite, cilindrite and andorite. Associated with the mineralization, several phosphate minerals are found filling cavities and small fractures. The most abundant are monacite (Ce,La,Nd,Th)PO4 and plumbogummite (PbAl3(PO4)2(OH)5•(H2O)). Crandallite CaAl3(PO4)2(OH)5•(H2O) and vivianite (Fe3+(PO4)2•8(H2O)) also

  17. Properties of TiN and TiN deposited by CVD on graphite for pyrochemical applications.

    SciTech Connect

    Maiya, P. S.; Moon, B. M.

    1997-12-17

    High-density TiN (>98% of theoretical) has been prepared by hot pressing TiN powder with 2-4 wt.% Li{sub 2}C0{sub 3} at temperatures between 1150-1550 C and pressures of {approx}40-50 MPa. The Li{sub 2}C0{sub 3} served as a fugitive sintering aid, enabling attainment of high density at low temperatures without adversely affecting the inherently good properties. Variation in processing variables and TiN powder characteristics resulted in material with various porosities. Measurement of mechanical properties such as flexural strength and fracture toughness showed that the high-density material has mechanical properties that are superior to those of several oxide ceramics. We have also quantified the effects of porosity on mechanical properties. In addition, adhesion and chemical stability tests were used to investigate graphite coated with TiN by chemical vapor deposition (CVD). Pin-pull tests were used to determine coating adhesion and failure stresses were analyzed by Weibull statistics. All pin-pull tests resulted in fracture of the graphite substrate, rather than separation at the TiN/graphite interface. The data showed a good fit to the two-parameter Weibull expression, with a failure strength of 16.4 MPa and Weibull modulus of 9.3. Both the high-density TiN and the TiN coating on the graphite were exposed to a corrosive molten salt CaCl{sub 2}-7 wt.% CaO and a liquid metal alloy (Zn-10 wt.% Mg) at 800 C for 168 h to determine chemical interactions. No reaction was detected by scanning electron microscopy (SEM) or energy-dispersive X-ray (EDX) analysis. Thus, graphite coated with TiN by CVD combines the thermodynamic stability of TiN when exposed to reactive molten metals and salts, with the excellent machinability of graphite, and hence is promising for use in container vessels for pyrochemical processing of certain rare-earth and nuclear metals, where chemical inertness and good matching of thermal expansion coefficients are required.

  18. Hydrogenated ultra-thin tin films predicted as two-dimensional topological insulators

    NASA Astrophysics Data System (ADS)

    Huang, Zhi-Quan; Chou, Bo-Hung; Hsu, Chia-Hsiu; Chuang, Feng-Chuan; Liu, Yu-Tzu; Lin, Hsin; Bansil, Arun

    2015-03-01

    Using thickness-dependent first-principles electronic structure calculations, we predict that hydrogenated ultra-thin films of tin harbor a new class of two-dimensional (2D) topological insulators (TIs). A single bilayer (BL) tin film assumes a 2D-TI phase, but it transforms into a trivial insulator after hydrogenation. In contrast, tin films with 2 and 3 BLs are found to be trivial insulators, but hydrogenation of 2 to 4 BL films results in a non-trivial TI phase. For 1 to 3 BLs, H-passivation converts the films from being metallic to insulating. Moreover, we examined iodine-terminated tin films up to 3 BLs, and found these to be non-trivial, with the films becoming semi-metallic beyond 1 BL. In particular, the large band gap of 340 meV in an iodine-terminated tin bilayer is not sustained in the iodine-terminated 2BL and 3BL tin films.

  19. Hydrogenated ultra-thin tin films predicted as two-dimensional topological insulators

    NASA Astrophysics Data System (ADS)

    Chou, Bo-Hung; Huang, Zhi-Quan; Hsu, Chia-Hsiu; Chuang, Feng-Chuan; Liu, Yu-Tzu; Lin, Hsin; Bansil, Arun

    2014-11-01

    Using thickness-dependent first-principles electronic structure calculations, we predict that hydrogenated ultra-thin films of tin harbor a new class of two-dimensional (2D) topological insulators (TIs). A single bilayer (BL) tin film assumes a 2D-TI phase, but it transforms into a trivial insulator after hydrogenation. In contrast, tin films with 2 and 3 BLs are found to be trivial insulators, but hydrogenation of 2 to 4 BL films results in a non-trivial TI phase. For 1 to 3 BLs, H-passivation converts the films from being metallic to insulating. Moreover, we examined iodine-terminated tin films up to 3 BLs, and found these to be non-trivial, with the films becoming semi-metallic beyond 1 BL. In particular, the large band gap of 340 meV in an iodine-terminated tin BL is not sustained in the iodine-terminated 2 BL and 3 BL tin films.

  20. Low-temperature and solution-processed indium tin oxide films and their applications in flexible transparent capacitive pressure sensors

    NASA Astrophysics Data System (ADS)

    Yu, Jian; Chen, Sujie; Wang, Nana; Ye, Zhizhen; Qi, Hang; Guo, Xiaojun; Jin, Yizheng

    2016-04-01

    It is of great interest to fabricate indium tin oxide (ITO) films by solution-based techniques at low temperatures. Here, we combined the use of colloidal ITO nanoflowers synthesized by the strategy of limited ligand protection and oxygen plasma treatment which effectively remove the surface ligands of ITO nanocrystals to meet this goal. These efforts led to high-quality ITO films with resistivity as low as 2.33 × 10-2 Ω cm, which is the best result for solution-processed ITO nanocrystal films deposited at temperatures lower than 200 °C. The annealing-free processing allowed us to deposit ITO nanoflower films onto plastic substrates and apply them in flexible capacitive pressure sensors. The single-pixel device showed decent sensitivity and reproducibility, and the arrayed sensors exhibited good spatial resolution.

  1. Electrical Conductivity of Tin Oxide Films in Ethanol Atmosphere

    NASA Astrophysics Data System (ADS)

    Park, Sung-Soon

    1995-01-01

    Porous ultrafine SnO_2 -based ethanol gas sensors in the shape of a thin film were successfully fabricated from tin alkoxide by the sol-gel dip coating technique. For the first time, the influences of film thickness, microstructure, and additives on the ethanol gas sensing properties of the sol-gel derived SnO _2 thin films were investigated. The equilibrium density of ionosorbed oxygens seemed to be maximum at 300^circC. This seemed to be the reason the sensitivity was maximum at 300^circC. Theoretically it was expected that the sensitivity would increase monotonically with decreasing the thickness, but the results were totally different from the prediction below the thickness of 700 A. The sensitivity increased down to the thickness of 700 A, but below 700 A it suddenly decreased. The sudden decrease seemed to be due to the sudden decrease of porosity, that is, the sudden decrease of the surface area for the oxidation reaction of rm C_2H_5 OH. Thus, it seemed that below 700 A, the sensitivity was governed by the microstructure, that is, porosity (surface area) rather than the thickness. The sensitivity was markedly increased by loading with rm La_2O _3 and Pt. The increased response time caused by loading with rm La_2O_3 was completely removed by loading with Pt. On the other hand, the sensitivity decreased with increasing relative humidity. The reason for this and the methods to decrease the humidity effect will be discussed. However, the Pt-La_2O_3-SnO _2 thin film sensors had strong dependence of the sensitivity on ethanol concentration, and the sensitivity at 70 ppm rm C_2H_5OH was as high as 28, being sensitive enough to be a breath alcohol checker and a monitor for alcohol vapor in air.

  2. Mesoporous tin-doped indium oxide thin films: effect of mesostructure on electrical conductivity

    PubMed Central

    von Graberg, Till; Hartmann, Pascal; Rein, Alexander; Gross, Silvia; Seelandt, Britta; Röger, Cornelia; Zieba, Roman; Traut, Alexander; Wark, Michael; Janek, Jürgen; Smarsly, Bernd M

    2011-01-01

    We present a versatile method for the preparation of mesoporous tin-doped indium oxide (ITO) thin films via dip-coating. Two poly(isobutylene)-b-poly(ethyleneoxide) (PIB-PEO) copolymers of significantly different molecular weight (denoted as PIB-PEO 3000 and PIB-PEO 20000) are used as templates and are compared with non-templated films to clarify the effect of the template size on the crystallization and, thus, on the electrochemical properties of mesoporous ITO films. Transparent, mesoporous, conductive coatings are obtained after annealing at 500 °C; these coatings have a specific resistance of 0.5 Ω cm at a thickness of about 100 nm. Electrical conductivity is improved by one order of magnitude by annealing under a reducing atmosphere. The two types of PIB-PEO block copolymers create mesopores with in-plane diameters of 20–25 and 35–45 nm, the latter also possessing correspondingly thicker pore walls. Impedance measurements reveal that the conductivity is significantly higher for films prepared with the template generating larger mesopores. Because of the same size of the primary nanoparticles, the enhanced conductivity is attributed to a higher conduction path cross section. Prussian blue was deposited electrochemically within the films, thus confirming the accessibility of their pores and their functionality as electrode material. PMID:27877387

  3. Mesoporous tin-doped indium oxide thin films: effect of mesostructure on electrical conductivity

    NASA Astrophysics Data System (ADS)

    von Graberg, Till; Hartmann, Pascal; Rein, Alexander; Gross, Silvia; Seelandt, Britta; Röger, Cornelia; Zieba, Roman; Traut, Alexander; Wark, Michael; Janek, Jürgen; Smarsly, Bernd M.

    2011-03-01

    We present a versatile method for the preparation of mesoporous tin-doped indium oxide (ITO) thin films via dip-coating. Two poly(isobutylene)-b-poly(ethyleneoxide) (PIB-PEO) copolymers of significantly different molecular weight (denoted as PIB-PEO 3000 and PIB-PEO 20000) are used as templates and are compared with non-templated films to clarify the effect of the template size on the crystallization and, thus, on the electrochemical properties of mesoporous ITO films. Transparent, mesoporous, conductive coatings are obtained after annealing at 500 °C these coatings have a specific resistance of 0.5 Ω cm at a thickness of about 100 nm. Electrical conductivity is improved by one order of magnitude by annealing under a reducing atmosphere. The two types of PIB-PEO block copolymers create mesopores with in-plane diameters of 20-25 and 35-45 nm, the latter also possessing correspondingly thicker pore walls. Impedance measurements reveal that the conductivity is significantly higher for films prepared with the template generating larger mesopores. Because of the same size of the primary nanoparticles, the enhanced conductivity is attributed to a higher conduction path cross section. Prussian blue was deposited electrochemically within the films, thus confirming the accessibility of their pores and their functionality as electrode material.

  4. Indium tin oxide with titanium doping for transparent conductive film application on CIGS solar cells

    NASA Astrophysics Data System (ADS)

    Liu, Wei-Sheng; Cheng, Huai-Ming; Hu, Hung-Chun; Li, Ying-Tse; Huang, Shi-Da; Yu, Hau-Wei; Pu, Nen-Wen; Liang, Shih-Chang

    2015-11-01

    In this study, Ti-doped indium tin oxide (ITO:Ti) thin films were fabricated using a DC-magnetron sputtering deposition method. The thin films were grown without introducing oxygen or heating the substrate, and no post-growth annealing was performed after fabrication. The thickness of the ITO:Ti thin films (350 nm) was controlled while increasing the sputtering power from 50 to 150 W. According to the results, the optimal optoelectronic properties were observed in ITO:Ti thin films grown at a sputtering power of 100 W, yielding a reduced resistivity of 3.2 × 10-4 Ω-cm and a mean high transmittance of 83% at wavelengths ranging from 400 to 800 nm. The optimal ITO:Ti thin films were used to fabricate a Cu(In,Ga)Se2 solar cell that exhibited a photoelectric conversion efficiency of 11.3%, a short-circuit current density of 33.1 mA/cm2, an open-circuit voltage of 0.54 V, and a fill factor of 0.64.

  5. Thermally evaporated methylammonium tin triiodide thin films for lead-free perovskite solar cell fabrication

    DOE PAGES

    Yu, Yue; Zhao, Dewei; Grice, Corey R.; ...

    2016-09-16

    Here, we report on the synthesis of methylammonium tin triiodide (MASnI3) thin films at room temperature by a hybrid thermal evaporation method and their application in fabricating lead (Pb)-free perovskite solar cells. The as-deposited MASnI3 thin films exhibit smooth surfaces, uniform coverage across the entire substrate, and strong crystallographic preferred orientation along the < 100 > direction. By incorporating this film with an inverted planar device architecture, our Pb-free perovskite solar cells are able to achieve an open-circuit voltage (Voc) up to 494 mV. The relatively high Voc is mainly ascribed to the excellent surface coverage, the compact morphology, themore » good stoichiometry control of the MASnI3 thin films, and the effective passivation of the electron-blocking and hole-blocking layers. Finally, our results demonstrate the potential capability of the hybrid evaporation method to prepare high-quality Pb-free MASnI3 perovskite thin films which can be used to fabricate efficient Pb-free perovskite solar cells.« less

  6. Thermally evaporated methylammonium tin triiodide thin films for lead-free perovskite solar cell fabrication

    SciTech Connect

    Yu, Yue; Zhao, Dewei; Grice, Corey R.; Meng, Weiwei; Wang, Changlei; Liao, Weiqiang; Cimaroli, Alexander J.; Zhang, Hongmei; Zhu, Kai; Yan, Yanfa

    2016-09-16

    Here, we report on the synthesis of methylammonium tin triiodide (MASnI3) thin films at room temperature by a hybrid thermal evaporation method and their application in fabricating lead (Pb)-free perovskite solar cells. The as-deposited MASnI3 thin films exhibit smooth surfaces, uniform coverage across the entire substrate, and strong crystallographic preferred orientation along the < 100 > direction. By incorporating this film with an inverted planar device architecture, our Pb-free perovskite solar cells are able to achieve an open-circuit voltage (Voc) up to 494 mV. The relatively high Voc is mainly ascribed to the excellent surface coverage, the compact morphology, the good stoichiometry control of the MASnI3 thin films, and the effective passivation of the electron-blocking and hole-blocking layers. Finally, our results demonstrate the potential capability of the hybrid evaporation method to prepare high-quality Pb-free MASnI3 perovskite thin films which can be used to fabricate efficient Pb-free perovskite solar cells.

  7. Thermally evaporated methylammonium tin triiodide thin films for lead-free perovskite solar cell fabrication

    SciTech Connect

    Yu, Yue; Zhao, Dewei; Grice, Corey R.; Meng, Weiwei; Wang, Changlei; Liao, Weiqiang; Cimaroli, Alexander J.; Zhang, Hongmei; Zhu, Kai; Yan, Yanfa

    2016-01-01

    We report on the synthesis of methylammonium tin triiodide (MASnI3) thin films at room temperature by a hybrid thermal evaporation method and their application in fabricating lead (Pb)-free perovskite solar cells. The as-deposited MASnI3 thin films exhibit smooth surfaces, uniform coverage across the entire substrate, and strong crystallographic preferred orientation along the <100> direction. By incorporating this film with an inverted planar device architecture, our Pb-free perovskite solar cells are able to achieve an open-circuit voltage (Voc) up to 494 mV. The relatively high Voc is mainly ascribed to the excellent surface coverage, the compact morphology, the good stoichiometry control of the MASnI3 thin films, and the effective passivation of the electron-blocking and hole-blocking layers. Our results demonstrate the potential capability of the hybrid evaporation method to prepare high-quality Pb-free MASnI3 perovskite thin films which can be used to fabricate efficient Pb-free perovskite solar cells.

  8. Effect of postdeposition annealing on structure and chemistry of the TiN film/steel substrate interfaces

    SciTech Connect

    Erdemir, A. ); Cheng, C.C. )

    1990-01-01

    This study deals with solid-state phase transformations occurring at interfaces between a TiN film and an AISI M50 steel substrate during post-deposition annealing at 500 and 1000{degree}C. Cross-sectional transmission electron microscopy (XTEM) was used to investigate the nature of phase transformations at these interfaces. The TiN films were ion plated onto M50 steel with an initial Ti underlayer at 100{degree}C. XTEM and electron-energy-loss spectroscopy of the interfaces indicated that the ion-plated Ti underlayers transformed into a TiC phase during annealing at 500{degree}C and into a Ti(C,N) phase during annealing at 1000{degree}C. In addition, the density of defects within grains was significantly reduced during annealing and the grains themselves became larger. 14 refs., 3 figs.

  9. Magnetron deposited TiN coatings for protection of Al-Cu-Ag-Mg-Mn alloy

    NASA Astrophysics Data System (ADS)

    Stepanova, Tatiana V.; Kaziev, Andrey V.; Atamanov, Mikhail V.; Tumarkin, Alexander V.; Dolzhikova, Svetlana A.; Izmailova, Nelly Ph; Kharkov, Maxim M.; Berdnikova, Maria M.; Mozgrin, Dmitry V.; Pisarev, Alexander A.

    2016-09-01

    TiN coatings were deposited on a new Al super-alloy by magnetron sputtering in argon/nitrogen environment. The deposited layer structure, microhardness, adhesion, corrosion resistance, and fatigue life were investigated and tests demonstrated improved performance of the alloy.

  10. Electrophoretic deposition of tannic acid-polypyrrolidone films and composites.

    PubMed

    Luo, Dan; Zhang, Tianshi; Zhitomirsky, Igor

    2016-05-01

    Thin films of polyvinylpyrrolidone (PVP)-tannic acid (TA) complexes were prepared by a conceptually new strategy, based on electrophoretic deposition (EPD). Proof of concept investigations involved the analysis of the deposition yield, FTIR and UV-vis spectroscopy of the deposited material, and electron microscopy studies. The analysis of the deposition mechanism indicated that the limitations of the EPD in the deposition of small phenolic molecules, such as TA, and electrically neutral polymers, similar to PVP, containing hydrogen-accepting carbonyl groups, can be avoided. The remarkable adsorption properties of TA and film forming properties of the PVP-TA complexes allowed for the EPD of materials of different types, such as huntite mineral platelets and hydrotalcite clay particles, TiO2 and MnO2 oxide nanoparticles, multiwalled carbon nanotubes, TiN and Pd nanoparticles. Moreover, PVP-TA complexes were used for the co-deposition of different materials and formation of composite films. In another approach, TA was used as a capping agent for the hydrothermal synthesis of ZnO nanorods, which were then deposited by EPD using PVP-TA complexes. The fundamental adsorption and interaction mechanisms of TA involved chelation of metal atoms on particle surfaces with galloyl groups, π-π interactions and hydrogen bonding. The films prepared by EPD can be used for various applications, utilizing functional properties of TA, PVP, inorganic and organic materials of different types and their composites.

  11. Indium tin oxide films prepared by atmospheric plasma annealing and their semiconductor-metal conductivity transition around room temperature

    NASA Astrophysics Data System (ADS)

    Li, Yali; Li, Chunyang; He, Deyan; Li, Junshuai

    2009-05-01

    We report the synthesis of indium tin oxide (ITO) films using the atmospheric plasma annealing (APA) technique combined with the spin-coating method. The ITO film with a low resistivity of ~4.6 × 10-4 Ω cm and a high visible light transmittance, above 85%, was achieved. Hall measurement indicates that compared with the optimized ITO films deposited by magnetron sputtering, the above-mentioned ITO film has a higher carrier concentration of ~1.21 × 1021 cm-3 and a lower mobility of ~11.4 cm2 V-1 s-1. More interestingly, these electrical characteristics result in the semiconductor-metal conductivity transition around room temperature for the ITO films prepared by APA.

  12. Morphology and inner structure of ethanol sensitive thin films of tin oxide operating at near room temperature

    NASA Astrophysics Data System (ADS)

    Mahdi, O. S.; Malyar, I. V.; Galushka, V. V.; Smirnov, A. V.; Sinev, I. V.; Venig, S. B.

    2017-06-01

    Thin tin oxide films were fabricated by reactive RF magnetron sputtering. It was shown that the films possess gas sensitivity to ethanol vapor at 38°C. Measurements of the morphology and cleavage inner structure of the samples by atomic-force and scanning electron microscopy demonstrate that the films are composed of nanodimensional rod-like grains oriented normally to the substrate. The grains are separated by pores piercing the whole film. It was found that the grain diameter distribution is normal logarithmic one with several centers related as small integers, which indicates that the grains coalesce. The minimum grain size of 6 nm might correspond to the critical nucleus size under the used conditions of film deposition.

  13. The effect of annealing temperature on the stability of gallium tin zinc oxide thin film transistors

    NASA Astrophysics Data System (ADS)

    Nguyen, Ngoc; McCall, Briana; Alston, Robert; Collis, Ward; Iyer, Shanthi

    2015-10-01

    With the growing need for large area display technology and the push for a faster and cheaper alternative to the current amorphous indium gallium zinc oxide (a-IGZO) as the active channel layer for pixel-driven thin film transistors (TFTs) display applications, gallium tin zinc oxide (GSZO) has shown to be a promising candidate due to the similar electronic configuration of Sn4+ and In3+. In this work TFTs of GSZO sputtered films with only a few atomic % of Ga and Sn have been fabricated. A systematic and detailed comparison has been made of the properties of the GSZO films annealed at two temperatures: 140 °C and 450 °C. The electrical and optical stabilities of the respective devices have been studied to gain more insight into the degradation mechanism and are correlated with the initial TFT performance prior to the application of stress. Post deposition annealing at 450 °C of the films in air was found to lead to a higher atomic concentration of Sn4+ in these films and a superior quality of the film, as attested by the higher film density and less surface and interface roughness in comparison to the lower annealed temperature device. These result in significantly reduced shallow and deep interface traps with improved performance of the device exhibiting VON of -3.5 V, ION/IOFF of 108, field-effect mobility (μFE) of 4.46 cm2 V-1s-1, and sub-threshold swing of 0.38 V dec-1. The device is stable under both electrical and optical bias for wavelengths of 550 nm and above. Thus, this work demonstrates GSZO-based TFTs as a promising viable option to the IGZO TFTs by further tailoring the film composition and relevant processing temperatures.

  14. 3D indium tin oxide electrodes by ultrasonic spray deposition for current collection applications

    NASA Astrophysics Data System (ADS)

    van den Ham, E. J.; Elen, K.; Bonneux, G.; Maino, G.; Notten, P. H. L.; Van Bael, M. K.; Hardy, A.

    2017-04-01

    Three dimensionally (3D) structured indium tin oxide (ITO) thin films are synthesized and characterized as a 3D electrode material for current collection applications. Using metal citrate chemistry in combination with ultrasonic spray deposition, a low cost wet-chemical method has been developed to achieve conformal ITO coatings on non-planar scaffolds. Although there is room for improvement with respect to the resistivity (9.9·10-3 Ω•cm, 220 nm thick planar films), high quality 3D structured coatings were shown to exhibit conductive properties based on ferrocene reactivity. In view of applications in Li-ion batteries, the electrochemical stability of the current collector was investigated, indicating that stability is guaranteed for voltages of 1.5 V and up (vs. Li+/Li). In addition, subsequent 3D coating of the ITO with WO3 as a negative electrode (battery) material confirmed the 3D ITO layer functions as a proper current collector. Using this approach, an over 4-fold capacity increase was booked for 3D structured WO3 in comparison to planar samples, confirming the current collecting capabilities of the 3D ITO coating. Therefore, the 3D ITO presented is considered as a highly interesting material for 3D battery applications and beyond.

  15. Growth of YBCO Thin Films on TiN(001) and CeO2-Coated TiN Surfaces

    DTIC Science & Technology

    2012-02-01

    substrates. Thin CeO2 (~200 nm thick) and YBCO (~300 nm thick) layers were grown on TiN-coated MgO substrates, using pulsed laser deposition. While YBCO ...and YBCO (300 nm thick) layers were grown on TiN-coated MgO substrates, using pulsed laser deposition. While YBCO grown directly on TiN was of poor...grown on the TiN-coated MgO and then an 300 nm thick YBCO layers was subsequently depos- ited. For other samples, YBCO deposition directly on the

  16. Tin oxide dependence of the CO2 reduction efficiency on tin electrodes and enhanced activity for tin/tin oxide thin-film catalysts.

    PubMed

    Chen, Yihong; Kanan, Matthew W

    2012-02-01

    The importance of tin oxide (SnO(x)) to the efficiency of CO(2) reduction on Sn was evaluated by comparing the activity of Sn electrodes that had been subjected to different pre-electrolysis treatments. In aqueous NaHCO(3) solution saturated with CO(2), a Sn electrode with a native SnO(x) layer exhibited potential-dependent CO(2) reduction activity consistent with previously reported activity. In contrast, an electrode etched to expose fresh Sn(0) surface exhibited higher overall current densities but almost exclusive H(2) evolution over the entire 0.5 V range of potentials examined. Subsequently, a thin-film catalyst was prepared by simultaneous electrodeposition of Sn(0) and SnO(x) on a Ti electrode. This catalyst exhibited up to 8-fold higher partial current density and 4-fold higher faradaic efficiency for CO(2) reduction than a Sn electrode with a native SnO(x) layer. Our results implicate the participation of SnO(x) in the CO(2) reduction pathway on Sn electrodes and suggest that metal/metal oxide composite materials are promising catalysts for sustainable fuel synthesis.

  17. Investigation of the Optoelectronic Properties of Ti-doped Indium Tin Oxide Thin Film.

    PubMed

    Pu, Nen-Wen; Liu, Wei-Sheng; Cheng, Huai-Ming; Hu, Hung-Chun; Hsieh, Wei-Ting; Yu, Hau-Wei; Liang, Shih-Chang

    2015-09-21

    : In this study, direct-current magnetron sputtering was used to fabricate Ti-doped indium tin oxide (ITO) thin films. The sputtering power during the 350-nm-thick thin-film production process was fixed at 100 W with substrate temperatures increasing from room temperature to 500 °C. The Ti-doped ITO thin films exhibited superior thin-film resistivity (1.5 × 10(-)⁴ Ω/cm), carrier concentration (4.1 × 10(21) cm(-)³), carrier mobility (10 cm²/Vs), and mean visible-light transmittance (90%) at wavelengths of 400-800 nm at a deposition temperature of 400 °C. The superior carrier concentration of the Ti-doped ITO alloys (>10(21) cm(-)³) with a high figure of merit (81.1 × 10(-)³ Ω(-)¹) demonstrate the pronounced contribution of Ti doping, indicating their high suitability for application in optoelectronic devices.

  18. Fully transparent flexible tin-doped zinc oxide thin film transistors fabricated on plastic substrate

    NASA Astrophysics Data System (ADS)

    Han, Dedong; Zhang, Yi; Cong, Yingying; Yu, Wen; Zhang, Xing; Wang, Yi

    2016-12-01

    In this work, we have successfully fabricated bottom gate fully transparent tin-doped zinc oxide thin film transistors (TZO TFTs) fabricated on flexible plastic substrate at low temperature by RF magnetron sputtering. The effect of O2/Ar gas flow ratio during channel deposition on the electrical properties of TZO TFTs was investigated, and we found that the O2/Ar gas flow ratio have a great influence on the electrical properties. TZO TFTs on flexible substrate has very nice electrical characteristics with a low off-state current (Ioff) of 3 pA, a high on/off current ratio of 2 × 107, a high saturation mobility (μsat) of 66.7 cm2/V•s, a steep subthreshold slope (SS) of 333 mV/decade and a threshold voltage (Vth) of 1.2 V. Root-Mean-Square (RMS) roughness of TZO thin film is about 0.52 nm. The transmittance of TZO thin film is about 98%. These results highlight that the excellent device performance can be realized in TZO film and TZO TFT can be a promising candidate for flexible displays.

  19. Fully transparent flexible tin-doped zinc oxide thin film transistors fabricated on plastic substrate.

    PubMed

    Han, Dedong; Zhang, Yi; Cong, Yingying; Yu, Wen; Zhang, Xing; Wang, Yi

    2016-12-12

    In this work, we have successfully fabricated bottom gate fully transparent tin-doped zinc oxide thin film transistors (TZO TFTs) fabricated on flexible plastic substrate at low temperature by RF magnetron sputtering. The effect of O2/Ar gas flow ratio during channel deposition on the electrical properties of TZO TFTs was investigated, and we found that the O2/Ar gas flow ratio have a great influence on the electrical properties. TZO TFTs on flexible substrate has very nice electrical characteristics with a low off-state current (Ioff) of 3 pA, a high on/off current ratio of 2 × 10(7), a high saturation mobility (μsat) of 66.7 cm(2)/V•s, a steep subthreshold slope (SS) of 333 mV/decade and a threshold voltage (Vth) of 1.2 V. Root-Mean-Square (RMS) roughness of TZO thin film is about 0.52 nm. The transmittance of TZO thin film is about 98%. These results highlight that the excellent device performance can be realized in TZO film and TZO TFT can be a promising candidate for flexible displays.

  20. Fully transparent flexible tin-doped zinc oxide thin film transistors fabricated on plastic substrate

    PubMed Central

    Han, Dedong; Zhang, Yi; Cong, Yingying; Yu, Wen; Zhang, Xing; Wang, Yi

    2016-01-01

    In this work, we have successfully fabricated bottom gate fully transparent tin-doped zinc oxide thin film transistors (TZO TFTs) fabricated on flexible plastic substrate at low temperature by RF magnetron sputtering. The effect of O2/Ar gas flow ratio during channel deposition on the electrical properties of TZO TFTs was investigated, and we found that the O2/Ar gas flow ratio have a great influence on the electrical properties. TZO TFTs on flexible substrate has very nice electrical characteristics with a low off-state current (Ioff) of 3 pA, a high on/off current ratio of 2 × 107, a high saturation mobility (μsat) of 66.7 cm2/V•s, a steep subthreshold slope (SS) of 333 mV/decade and a threshold voltage (Vth) of 1.2 V. Root-Mean-Square (RMS) roughness of TZO thin film is about 0.52 nm. The transmittance of TZO thin film is about 98%. These results highlight that the excellent device performance can be realized in TZO film and TZO TFT can be a promising candidate for flexible displays. PMID:27941915

  1. Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating.

    PubMed

    Lang, W C; Gao, B; Du, H; Xiao, J O; Li, M X; Wang, X H

    2015-09-01

    Macroparticle contamination deteriorates the qualities and performances of protective coatings by arc ion plating, resulting in a limitation in their applications. In this work, the effects of transverse magnetic field (TMF), pulsed bias, gas pressure, and substrate position on behavior of the macro-particles (MPs) in TiN films are quantitatively investigated. It is demonstrated that the key factor of the deposition process on the MPs behavior is magnetic field, which controls the movement of arc spot significantly. At relatively low magnetic field intensity, the MPs behavior is greatly influenced by the other three process parameters. The sensibilities of the three parameters on MPs behavior are decreased with the increasing magnetic field intensity. At high magnetic field intensity, the MPs distribution keeps almost the same even when the other parameters are varied.

  2. Thickness effect on laser-induced-damage threshold of indium-tin oxide films at 1064 nm

    NASA Astrophysics Data System (ADS)

    Wang, Haifeng; Huang, Zhimeng; Zhang, Dayong; Luo, Fei; Huang, Lixian; Li, Yanglong; Luo, Yongquan; Wang, Weiping; Zhao, Xiangjie

    2011-12-01

    Laser-induced-damage characteristics of commercial indium-tin oxide (ITO) films deposited by DC magnetron sputtering deposition on K9 glass substrates as a function of the film thickness have been studied at 1064 nm with a 10 ns laser pulse in the 1-on-1 mode, and the various mechanisms for thickness effect on laser-induced-damage threshold (LIDT) of the film have been discussed in detail. It is observed that laser-damage-resistance of ITO film shows dramatic thickness effect with the LIDT of the 50-nm ITO film 7.6 times as large as the value of 300 nm film, and the effect of depressed carrier density by decreasing the film thickness is demonstrated to be the primary reason. Our experiment findings indicate that searching transparent conductive oxide (TCO) film with low carrier density and high carrier mobility is an efficient technique to improve the laser-damage-resistance of TCO films based on maintaining their well electric conductivity.

  3. Structure and mechanical properties of Ti-Si-N films deposited by combined DC/RF reactive unbalanced magnetron sputtering

    NASA Astrophysics Data System (ADS)

    Ding, X. Z.; Zeng, X. T.; Liu, Y. C.; Yang, Q.; Zhao, L. R.

    2004-11-01

    Ti-Si-N nanocomposite films with Si content between 0 and 13.5 at. % were deposited by combined DC/RF reactive unbalanced magnetron sputtering. The composition, structure, and mechanical properties of the as-deposited Ti-Si-N films were measured by energy dispersive analysis of x rays, x-ray diffraction (XRD), and nanoindentation experiments, respectively. All of the Ti-Si-N films exhibited a higher hardness than pure TiN films deposited under similar conditions. The highest hardness (~41 GPa) was obtained in the film with Si content of about 8 at. %. Ti-Si-N films also exhibited a higher resistance to plastic deformation (i.e., higher ratio H3/E*2) than pure TiN. XRD patterns revealed that the as-deposited films were composed of cubic TiN crystallites with a preferential orientation of (111). With increase of RF power applied to the Si targets, the TiN (111) peak intensity or TiN crystallite size increased in the lower RF power range but decreased in the higher RF power range, showing a maximum at an RF power of 500 W (power density ~1.14 W/cm2), corresponding to a Si content of about 5 at. % in the film.

  4. Thermal conductivity of nitride films of Ti, Cr, and W deposited by reactive magnetron sputtering

    SciTech Connect

    Jagannadham, Kasichainula

    2015-05-15

    Nitride films of Ti, Cr, and W were deposited using reactive magnetron sputtering from metal targets in argon and nitrogen plasma. TiN films with (200) orientation were achieved on silicon (100) at the substrate temperature of 500 and 600 °C. The films were polycrystalline at lower temperature. An amorphous interface layer was observed between the TiN film and Si wafer deposited at 600 °C. TiN film deposited at 600 °C showed the nitrogen to Ti ratio to be near unity, but films deposited at lower temperature were nitrogen deficient. CrN film with (200) orientation and good stoichiometry was achieved at 600 °C on Si(111) wafer but the film deposited at 500 °C showed cubic CrN and hexagonal Cr{sub 2}N phases with smaller grain size and amorphous back ground in the x-ray diffraction pattern. An amorphous interface layer was not observed in the cubic CrN film on Si(111) deposited at 600 °C. Nitride film of tungsten deposited at 600 °C on Si(100) wafer was nitrogen deficient, contained both cubic W{sub 2}N and hexagonal WN phases with smaller grain size. Nitride films of tungsten deposited at 500 °C were nonstoichiometric and contained cubic W{sub 2}N and unreacted W phases. There was no amorphous phase formed along the interface for the tungsten nitride film deposited at 600 °C on the Si wafer. Thermal conductivity and interface thermal conductance of all the nitride films of Ti, Cr, and W were determined by transient thermoreflectance technique. The thermal conductivity of the films as function of deposition temperature, microstructure, nitrogen stoichiometry and amorphous interaction layer at the interface was determined. Tungsten nitride film containing both cubic and hexagonal phases was found to exhibit much higher thermal conductivity and interface thermal conductance. The amorphous interface layer was found to reduce effective thermal conductivity of TiN and CrN films.

  5. Chemical vapor deposition and atomic layer deposition of metal oxide and nitride thin films

    NASA Astrophysics Data System (ADS)

    Barton, Jeffrey Thomas

    Processes for depositing thin films with various electronic, optical, mechanical, and chemical properties are indispensable in many industries today. Of the many deposition methods available, chemical vapor deposition (CVD) has proved over time to be one of the most flexible, efficient, and cost-effective. Atomic layer deposition (ALD) is a newer process that is gaining favor as a method for depositing films with excellent properties and unparalleled precision. This work describes the development of novel CVD and ALD processes to deposit a variety of materials. Hafnium oxide and zirconium oxide show promise as replacements for SiO 2 as gate dielectrics in future-generation transistors. These high-k materials would provide sufficient capacitance with layers thick enough to avoid leakage from tunneling. An ALD method is presented here for depositing conformal hafnium oxide from tetrakis-(diethylamido)hafnium and oxygen gas. A CVD method for depositing zirconium oxide from tetrakis-(dialkylamido)zirconium and either oxygen gas or water vapor is also described. The use of copper for interconnects in integrated circuits requires improved diffusion barrier materials, given its high diffusivity compared to the previously-used aluminum and tungsten. Tungsten nitride has a low resistivity among barrier materials, and can be deposited in amorphous films that are effective diffusion barriers in layers as thin as a few nanometers. Here we demonstrate CVD and plasma-enhanced CVD methods to deposit tungsten nitride films from bis-(dialkylamido)bis-( tert-butylimido)tungsten precursors and ammonia gas. Recent findings had shown uniform copper growth on tantalum silicate films, without the dewetting that usually occurs on oxide surfaces. Tantalum and tungsten silicates were deposited by a CVD reaction from the reaction of either tris-(diethylamido)ethylimido tantalum or bis-(ethylmethylamido)-bis-( tert-butylimido)tungsten with tris-(tert-butoxy)silanol. The ability of evaporated

  6. The effects of deposition temperature on the interfacial properties of SiH4 reduced blanket tungsten on TiN glue layer

    NASA Astrophysics Data System (ADS)

    Lee, Young J.; Park, Chong-Ook; Kim, Dong-Won; Chun, John S.

    1994-10-01

    Low pressure chemical vapor deposition tungsten films were deposited at various temperatures, using a WF6-SiH4-H2 gas mixture. The impurity distribution at the W/TiN interface was investigated by Auger electron spectroscopy depth profiling. Some fluorine accumulation at the interface is observed when the tungsten is deposited below 300°C. However, above 300°C, no accumulation of fluorine could be observed. A result obtained from thermodynamic calculations using SOLGASMIX-PV suggests that this phenomenon is closely associated with the highly oxidized surface layer of TiN at the initial stage of deposition. The reaction of the gas mixture with the TiN surface layer seems to enhance the fluorine accumulation, which lowers the adherence of the interface and increases the contact resistance.

  7. Surface and optical properties of indium tin oxide layer deposition by RF magnetron sputtering in argon atmosphere

    NASA Astrophysics Data System (ADS)

    Yudar, H. Hakan; Korkmaz, Şadan; Özen, Soner; Şenay, Volkan; Pat, Suat

    2016-08-01

    This study focused on the characterization and properties of transparent and conductive indium tin oxide (ITO) thin films deposited in argon atmosphere. ITO thin films were coated onto glass substrates by radio frequency (RF) magnetron sputtering technique at 75 and 100 W RF powers. Structural characteristics of producing films were investigated through X-ray diffraction analysis. UV-Vis spectrophotometer and interferometer were used to determine transmittance, absorbance and reflectance values of samples. The surface morphology of the films was characterized by atomic force microscope. The calculated band gaps were 3.8 and 4.1 eV for the films at 75 and 100 W, respectively. The effect of RF power on crystallinity of prepared films was explored using mentioned analysis methods. The high RF power caused higher poly crystallinity in the produced samples. The thickness and refractive index values for all samples increased respect to an increment of RF power and were calculated as 20, 50 nm and 1.71, 1.86 for samples at 75 and 100 W, respectively. Finally, the estimated grain sizes for all prepared films decreased with increasing of 2 θ degrees, and the number of crystallite per unit volume was calculated. It was found that nearly all properties including sheet resistance and resistivity depend on the RF power.

  8. Experiments on In2S3:Sn Thin Films with up to 1% Tin Content

    NASA Astrophysics Data System (ADS)

    Kraini, M.; Bouguila, N.; Koaib, J.; Vázquez-Vázquez, C.; López-Quintela, M. A.; Alaya, S.

    2016-11-01

    Tin-doped indium sulfide (In2S3:Sn) thin films with different Sn:In molar ratios (0% to 1% by mol in solution) have been deposited on glass substrates by a chemical spray pyrolysis method. The films were investigated by x-ray diffraction analysis, optical absorption, Raman, and photoluminescence spectroscopies, field-emission scanning electron microscopy, energy-dispersive x-ray spectroscopy, and atomic force microscopy. The structural properties revealed that the In2S3:Sn thin films had polycrystalline cubic structure with average crystallite size increasing from 16.3 nm to 25.5 nm. The surface morphology of the films was continuous and crack free. The average and root-mean-square roughness increased from 13.12 nm to 31.65 nm and from 16.14 nm to 39.39 nm, respectively, with increasing Sn:In molar ratio. Raman studies revealed the presence of vibration modes related to In2S3 phase, with no signature of secondary phases. The transmission coefficient was about 65% to 70% in the visible region and 70% to 90% in the near-infrared region. The optical bandgap values for allowed direct transitions in In2S3:Sn were found to lie in the range from 2.68 eV to 2.80 eV. The refractive index of the In2S3:Sn thin films decreased from 2.45 to 2.37 while the k values lay in the range from 0.02 to 0.25 for all wavelengths. Defect-related photoluminescence properties are also discussed. These In2S3:Sn films are promising candidates for use in optoelectronic and photovoltaic devices.

  9. Physical Characterization and Effect of Effective Surface Area on the Sensing Properties of Tin Dioxide Thin Solid Films in a Propane Atmosphere

    PubMed Central

    Gómez-Pozos, Heberto; González-Vidal, José Luis; Torres, Gonzalo Alberto; de la Luz Olvera, María; Castañeda, Luis

    2014-01-01

    The physical properties and the effect of effective surface area (ESA) on the sensing properties of tin dioxide [SnO2] thin films in air and propane [C3H8] atmosphere as a function of operating temperature and gas concentration have been studied in this paper. SnO2 thin films with different estimated thicknesses (50, 100 and 200 nm) were deposited on glass substrates by the chemical spray technique. Besides, they were prepared at two different deposition temperatures (400 and 475 °C). Tin chloride [SnCl4 · 5H2O] with 0.2 M concentration value and ethanol [C2H6O] were used as tin precursor and solvent, respectively. The morphological, and structural properties of the as-prepared films were analyzed by AFM and XRD, respectively. Gas sensing characteristics of SnO2 thin solid films were measured at operating temperatures of 22, 100, 200, and 300 °C, and at propane concentration levels (0, 5, 50, 100, 200, 300, 400, and 500 ppm). ESA values were calculated for each sample. It was found that the ESA increased with the increasing thickness of the films. The results demonstrated the importance of the achieving of a large effective surface area for improving gas sensing performance. SnO2 thin films deposited by spray chemical were chosen to study the ESA effect on gas sensing properties because their very rough surfaces were appropriate for this application. PMID:24379046

  10. Perpendicular coercivity enhancement of CoPt/TiN films by nitrogen incorporation during deposition

    SciTech Connect

    An, Hongyu; Harumoto, Takashi; Sannomiya, Takumi; Muraishi, Shinji; Nakamura, Yoshio; Shi, Ji; Wang, Jian; Szivos, Janos; Safran, Gyorgy

    2015-11-28

    The effect of N incorporation on the structure and magnetic properties of CoPt thin films deposited on glass substrates with TiN seed layers has been investigated. During the deposition of CoPt, introducing 20% N{sub 2} into Ar atmosphere promotes the (001) texture and enhances the perpendicular coercivity of CoPt film compared with the film deposited in pure Ar and post-annealed under the same conditions. From the in situ x-ray diffraction results, it is confirmed that N incorporation expands the lattice parameter of CoPt, which favors the epitaxial growth of CoPt on TiN. During the post-annealing process, N releases from CoPt film and promotes the L1{sub 0} ordering transformation of CoPt.

  11. Deposition of magnetoelectric hexaferrite thin films on substrates of silicon

    NASA Astrophysics Data System (ADS)

    Zare, Saba; Izadkhah, Hessam; Vittoria, Carmine

    2016-12-01

    Magnetoelectric M-type hexaferrite thin films (SrCo2Ti2Fe8O19) were deposited using Pulsed Laser Deposition (PLD) technique on Silicon substrate. A conductive oxide layer of Indium-Tin Oxide (ITO) was deposited as a buffer layer with the dual purposes of 1) to reduce lattice mismatch between the film and silicon and 2) to lower applied voltages to observe magnetoelectric effects at room temperature on Silicon based devices. The film exhibited magnetoelectric effects as confirmed by vibrating sample magnetometer (VSM) techniques in voltages as low as 0.5 V. Without the oxide conductive layer the required voltages to observe magnetoelectric effects was typically about 1000 times larger. The magnetoelectric thin films were characterized by X-ray diffractometer, scanning electron microscope, energy-dispersive spectroscopy, vibrating sample magnetometer, and ferromagnetic resonance techniques. We measured saturation magnetization of 650 G, and coercive field of about 150 Oe for these thin films. The change in remanence magnetization was measured in the presence of DC voltages and the changes in remanence were in the order of 15% with the application of only 0.5 V (DC voltage). We deduced a magnetoelectric coupling, α, of 1.36×10-9 s m-1 in SrCo2Ti2Fe8O19 thin films.

  12. Electrodeposition and characterisation of lead tin superconducting films for application in heavy ion booster

    NASA Astrophysics Data System (ADS)

    Lobanov, Nikolai R.

    2015-12-01

    The ANU has developed experimental systems and procedures for lead-tin (PbSn) film deposition and characterisation. The 12 split loop resonators have been electroplated with 96%Pb4%Sn film to the final thickness of 1.5 micron using methanesulfonic acid (MSA) chemistry. As a result, an average acceleration field of 3.6 MV/m off-line at 6 W rf power was achieved at extremely low technological cost. Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), Heavy Ion Elastic Detection Analyses (HIERDA), Rutherford Backscattering Spectroscopy (RBS), Secondary Ion Mass Spectroscopy (SIMS) and Electron Backscattering Diffraction (EBSD) revealed correlation between the substrate and film structure, morphology and the rf performance of the cavity. The PbSn plating, exercised on the existing split loop resonators (SLR), has been extended to the two stub quarter wave resonator (QWR) as a straightforward step to quickly explore the superconducting performance of the new geometry. The oxygen free copper (OHFC) substrate for two stub QWR was prepared by reverse pulse electropolishing. The ultimate superconducting properties and long-term stability of the coatings have been assessed by operation of the ANU superconducting linac over the last few years.

  13. Microstructural characteristics of tin oxide-based thin films on (0001) Al2O3 substrates: effects of substrate temperature and RF power during co-sputtering.

    PubMed

    Hwang, Sooyeon; Lee, Ju Ho; Kim, Young Yi; Yun, Myeong Goo; Lee, Kwan-Hun; Lee, Jeong Yong; Cho, Hyung Koun

    2014-12-01

    While tin oxides such as SnO and SnO2 are widely used in various applications, surprisingly, only a limited number of reports have been presented on the microstructural characteristics of tin oxide thin films grown under various growth conditions. In this paper, the effects of the substrate temperature and content of foreign Zn ion on the microstructural characteristics of tin oxide thin films grown by radio-frequency magnetron sputtering were investigated. The increase in substrate temperature induced change in the stoichiometry of the thin films from SnO(1+x) to SnO(2-x). Additionally, the phase contrast in the transmission electron microscopy image revealed that SnO(1+x) and SnO(2-x) phases were alternating in thin films and the width of each phase became narrower at high substrate temperature. The ternary zinc tin oxide thin films were deposited using the co-sputtering method. As the ZnO target power increased, the crystallinity of the thin films became poly-crystalline, and then showed improved crystallinity again with two types of phases.

  14. Design, synthesis, thin film deposition and characterization of new indium tin oxide anode functionalization/hole transport organic materials and their application to high performance organic light-emitting diodes

    NASA Astrophysics Data System (ADS)

    Huang, Qinglan

    The primary goals of this dissertation were to understand the physical and chemical aspects of organic light-emitting diode (OLED) fundamentals, develop new materials as well as device structures, and enhance OLED electroluminescent (EL) response. Accordingly, this dissertation analyzes the relative effects of indium tin oxide (ITO) anode-hole transporting layer (HTL) contact vs. the intrinsic HTL material properties on OLED EL response. Two siloxane-based HTL materials, 4,4'-bis[(4″ -trichlorosilylpropyl-1″-naphthylphenylamino)biphenyl (NPB-Si2) and 4,4'-bis[(p-trichlorosilylpropylphenyl)phenylamino]biphenyl (TPD-Si2) have thereby been designed, synthesized and covalently bound to ITO surface. They afford a 250% increase in luminance and ˜50% reduction in turn-on voltage vs. comparable 4,4'-bis(1-naphthylphenylamino)biphenyl (NPB) HTL-based devices. These results suggest new strategies for developing OLED HTL structures, with focus on the anode-HTL contact. Furthermore, archetypical OLED device structures have been refined by simultaneously incorporating the TPD-Si2 layer and a hole- and exciton-blocking/electron transport layer (2,9-dimethyl-4,7-diphenyl-1,10-phenanthroline) in tris(8-hydroxyquinolato)aluminum(III) and tetrakis(2-methyl-8-hydroxyquinolinato)borate-based OLEDs. The refined device structures lead to high performance OLEDs such as green-emitting OLEDs with maximum luminance (Lmax) ˜ 85,000 cd/m2, power and forward external quantum efficiencies (eta p and etaext) as high as 15.2 lm/W and 4.4 +/- 0.5%, respectively, and blue-emitting OLEDs with Lmax 30,000 cd/m 2, and ˜5.0 lm/W and 1.6 +/- 0.2% etap and eta ext, respectively. The high performance is attributed to synergistically enhanced hole/electron injection and recombination efficiency. In addition, molecule-scale structure effects at ITO anode-HTL interfaces have been systematically probed via a self-assembly approach. A series of silyltriarylamine precursors differing in aryl group and

  15. Reversible wettability of electron-beam deposited indium-tin-oxide driven by ns-UV irradiation

    SciTech Connect

    Persano, Luana; Del Carro, Pompilio; Pisignano, Dario

    2012-04-09

    Indium tin oxide (ITO) is one of the most widely used semiconductor oxides in the field of organic optoelectronics, especially for the realization of anode contacts. Here the authors report on the control of the wettability properties of ITO films deposited by reactive electron beam deposition and irradiated by means of nanosecond-pulsed UV irradiation. The enhancement of the surface water wettability, with a reduction of the water contact angle larger than 50 deg., is achieved by few tens of seconds of irradiation. The analyzed photo-induced wettability change is fully reversible in agreement with a surface-defect model, and it can be exploited to realize optically transparent, conductive surfaces with controllable wetting properties for sensors and microfluidic circuits.

  16. Secondary Electron Yield Measurements of TiN coating and TiZrV getter film(LCC-128)

    SciTech Connect

    Le Pimpec, F

    2003-10-09

    In the beam pipe of the positron Main Damping Ring (MDR) of the Next Linear Collider (NLC), ionization of residual gases and secondary electron emission give rise to an electron cloud which can cause the loss of the circulating beam. One path to avoid the electron cloud is to ensure that the vacuum wall has low secondary emission yield and, therefore, we need to know the secondary emission yield (SEY) for candidate wall coatings. We report on SEY measurements at SLAC on titanium nitride (TiN) and titanium-zirconium-vanadium (TiZrV) thin sputter deposited films, as well as describe our experimental setup.

  17. Electrochemical deposition of conductive and adhesive polypyrrole-dopamine films

    PubMed Central

    Kim, Semin; Jang, Lindy K.; Park, Hyun S.; Lee, Jae Young

    2016-01-01

    Electrode surfaces have been widely modified with electrically conductive polymers, including polypyrrole (PPY), to improve the performance of electrodes. To utilize conductive polymers for electrode modification, strong adhesion between the polymer films and electrode substrates should be ensured with high electrical/electrochemical activities. In this study, PPY films were electrochemically polymerized on electrodes (e.g., indium tin oxide (ITO)) with dopamine as a bio-inspired adhesive molecule. Efficient and fast PPY electrodeposition with dopamine (PDA/PPY) was found; the resultant PDA/PPY films exhibited greatly increased adhesion strengths of up to 3.7 ± 0.8 MPa and the modified electrodes had electrochemical impedances two to three orders of magnitude lower than that of an unmodified electrode. This electrochemical deposition of adhesive and conductive PDA/PPY offers a facile and versatile electrode modification for various applications, such as biosensors and batteries. PMID:27459901

  18. Electrochemical deposition of conductive and adhesive polypyrrole-dopamine films.

    PubMed

    Kim, Semin; Jang, Lindy K; Park, Hyun S; Lee, Jae Young

    2016-07-27

    Electrode surfaces have been widely modified with electrically conductive polymers, including polypyrrole (PPY), to improve the performance of electrodes. To utilize conductive polymers for electrode modification, strong adhesion between the polymer films and electrode substrates should be ensured with high electrical/electrochemical activities. In this study, PPY films were electrochemically polymerized on electrodes (e.g., indium tin oxide (ITO)) with dopamine as a bio-inspired adhesive molecule. Efficient and fast PPY electrodeposition with dopamine (PDA/PPY) was found; the resultant PDA/PPY films exhibited greatly increased adhesion strengths of up to 3.7 ± 0.8 MPa and the modified electrodes had electrochemical impedances two to three orders of magnitude lower than that of an unmodified electrode. This electrochemical deposition of adhesive and conductive PDA/PPY offers a facile and versatile electrode modification for various applications, such as biosensors and batteries.

  19. Electrochemical deposition of conductive and adhesive polypyrrole-dopamine films

    NASA Astrophysics Data System (ADS)

    Kim, Semin; Jang, Lindy K.; Park, Hyun S.; Lee, Jae Young

    2016-07-01

    Electrode surfaces have been widely modified with electrically conductive polymers, including polypyrrole (PPY), to improve the performance of electrodes. To utilize conductive polymers for electrode modification, strong adhesion between the polymer films and electrode substrates should be ensured with high electrical/electrochemical activities. In this study, PPY films were electrochemically polymerized on electrodes (e.g., indium tin oxide (ITO)) with dopamine as a bio-inspired adhesive molecule. Efficient and fast PPY electrodeposition with dopamine (PDA/PPY) was found; the resultant PDA/PPY films exhibited greatly increased adhesion strengths of up to 3.7 ± 0.8 MPa and the modified electrodes had electrochemical impedances two to three orders of magnitude lower than that of an unmodified electrode. This electrochemical deposition of adhesive and conductive PDA/PPY offers a facile and versatile electrode modification for various applications, such as biosensors and batteries.

  20. Improved oxygen diffusion barrier properties of ruthenium-titanium nitride thin films prepared by plasma-enhanced atomic layer deposition.

    PubMed

    Jeong, Seong-Jun; Kim, Doo-In; Kim, Sang Ouk; Han, Tae Hee; Kwon, Jung-Dae; Park, Jin-Seong; Kwon, Se-Hun

    2011-01-01

    Ru-TiN thin films were prepared from bis(ethylcyclopentadienyl)ruthenium and tetrakis(dimethylamino)titanium using plasma-enhanced atomic layer deposition (PEALD). The Ru and TiN were deposited sequentially to intermix TiN with Ru. The composition of Ru-TiN films was controlled precisely by changing the number of deposition cycles allocated to Ru, while fixing the number of deposition cycles allocated to TiN. Although both Ru and TiN thin films have a polycrystalline structure, the microstructure of the Ru-TiN films changed from a TiN-like polycrystalline structure to a nanocrystalline on increasing the Ru intermixing ratio. Moreover, the electrical resistivity of the Ru0.67-TiN0.33 thin films is sufficiently low at 190 microomega x cm and was maintained even after O2 annealing at 750 degrees C. Therefore, Ru-TiN thin films can be utilized as a oxygen diffusion barrier material for future dynamic (DRAM) and ferroelectric (FeRAM) random access memory capacitors.

  1. High Temperature - Thin Film Strain Gages Based on Alloys of Indium Tin Oxide

    NASA Technical Reports Server (NTRS)

    Gregory, Otto J.; Cooke, James D.; Bienkiewicz, Joseph M.

    1998-01-01

    A stable, high temperature strain gage based on reactively sputtered indium tin oxide (ITO) was demonstrated at temperatures up to 1050 C. These strain sensors exhibited relatively large, negative gage factors at room temperature and their piezoresistive response was both linear and reproducible when strained up to 700 micro-in/in. When cycled between compression and tension, these sensors also showed very little hysteresis, indicating excellent mechanical stability. Thin film strain gages based on selected ITO alloys withstood more than 50,000 strain cycles of +/- 500 micro-in/in during 180 hours of testing in air at 1000 C, with minimal drift at temperature. Drift rates as low as 0.0009%/hr at 1000 C were observed for ITO films that were annealed in nitrogen at 700 C prior to strain testing. These results compare favorably with state of the art 10 micro-m thick PdCr films deposited by NASA, where drift rates of 0.047%/hr at 1050 C were observed. Nitrogen annealing not only produced the lowest drift rates to date, but also produce the largest dynamic gage factors (G = 23.5). These wide bandgap, semiconductor strain sensors also exhibited moderately low temperature coefficients of resistance (TCR) at temperatures up to 1100 C, when tested in a nitrogen ambient. A TCR of +230 ppm/C over the temperature range 200 C < T < 500 C and a TCR of -469 ppm/C over the temperature range 600 C < T < 1100 C was observed for the films tested in nitrogen. However, the resistivity behavior changed considerably when the same films were tested in oxygen ambients. A TCR of -1560 ppm/C was obtained over the temperature range of 200 C < T < 1100 C. When similar films were protected with an overcoat or when ITO films were prepared with higher oxygen contents in the plasma, two distinct TCR's were observed. At T < 800 C, a linear TCR of -210 ppm/C was observed and at T > 800 C, a linear TCR of -2170 DDm/C was observed. The combination of a moderately low TCR and a relatively large gage

  2. High Temperature - Thin Film Strain Gages Based on Alloys of Indium Tin Oxide

    NASA Technical Reports Server (NTRS)

    Gregory, Otto J.; Cooke, James D.; Bienkiewicz, Joseph M.

    1998-01-01

    A stable, high temperature strain gage based on reactively sputtered indium tin oxide (ITO) was demonstrated at temperatures up to 1050 C. These strain sensors exhibited relatively large, negative gage factors at room temperature and their piezoresistive response was both linear and reproducible when strained up to 700 micro-in/in. When cycled between compression and tension, these sensors also showed very little hysteresis, indicating excellent mechanical stability. Thin film strain gages based on selected ITO alloys withstood more than 50,000 strain cycles of +/- 500 micro-in/in during 180 hours of testing in air at 1000 C, with minimal drift at temperature. Drift rates as low as 0.0009%/hr at 1000 C were observed for ITO films that were annealed in nitrogen at 700 C prior to strain testing. These results compare favorably with state of the art 10 micro-m thick PdCr films deposited by NASA, where drift rates of 0.047%/hr at 1050 C were observed. Nitrogen annealing not only produced the lowest drift rates to date, but also produce the largest dynamic gage factors (G = 23.5). These wide bandgap, semiconductor strain sensors also exhibited moderately low temperature coefficients of resistance (TCR) at temperatures up to 1100 C, when tested in a nitrogen ambient. A TCR of +230 ppm/C over the temperature range 200 C < T < 500 C and a TCR of -469 ppm/C over the temperature range 600 C < T < 1100 C was observed for the films tested in nitrogen. However, the resistivity behavior changed considerably when the same films were tested in oxygen ambients. A TCR of -1560 ppm/C was obtained over the temperature range of 200 C < T < 1100 C. When similar films were protected with an overcoat or when ITO films were prepared with higher oxygen contents in the plasma, two distinct TCR's were observed. At T < 800 C, a linear TCR of -210 ppm/C was observed and at T > 800 C, a linear TCR of -2170 DDm/C was observed. The combination of a moderately low TCR and a relatively large gage

  3. Low temperature atmospheric pressure chemical vapor deposition of group 14 oxide films

    SciTech Connect

    Hoffman, D.M.; Atagi, L.M. |; Chu, Wei-Kan; Liu, Jia-Rui; Zheng, Zongshuang; Rubiano, R.R.; Springer, R.W.; Smith, D.C.

    1994-06-01

    Depositions of high quality SiO{sub 2} and SnO{sub 2} films from the reaction of homoleptic amido precursors M(NMe{sub 2})4 (M = Si,Sn) and oxygen were carried out in an atmospheric pressure chemical vapor deposition r. The films were deposited on silicon, glass and quartz substrates at temperatures of 250 to 450C. The silicon dioxide films are stoichiometric (O/Si = 2.0) with less than 0.2 atom % C and 0.3 atom % N and have hydrogen contents of 9 {plus_minus} 5 atom %. They are deposited with growth rates from 380 to 900 {angstrom}/min. The refractive indexes of the SiO{sub 2} films are 1.46, and infrared spectra show a possible Si-OH peak at 950 cm{sup {minus}1}. X-Ray diffraction studies reveal that the SiO{sub 2} film deposited at 350C is amorphous. The tin oxide films are stoichiometric (O/Sn = 2.0) and contain less than 0.8 atom % carbon, and 0.3 atom % N. No hydrogen was detected by elastic recoil spectroscopy. The band gap for the SnO{sub 2} films, as estimated from transmission spectra, is 3.9 eV. The resistivities of the tin oxide films are in the range 10{sup {minus}2} to 10{sup {minus}3} {Omega}cm and do not vary significantly with deposition temperature. The tin oxide film deposited at 350C is cassitterite with some (101) orientation.

  4. Iridium thin films deposited via pulsed laser deposition

    NASA Astrophysics Data System (ADS)

    Chen, Chenglin

    High purity Ir thin films for future applications as transition-edge sensors were deposited on Si (100) via pulsed laser deposition. The iridium deposition rate was investigated and found to have a high value with the pulsed laser power higher than 4.2×10 9 W/cm 2 . At this laser intensity range, the PLD Ir films were deposited at substrate temperature ranging from 100 to 700°C. Ir thin films' characteristics were investigated at both room temperature and low temperature with the emphasis on study of the effect of the substrate temperature during deposition on the structure and morphology of the films. The PLD films exhibited a (110) preferentially oriented polycrystalline structure. Their average grain size increased from about 30 to 110 nm as the deposition temperature was raised from 100 to 600°C. With a 700°C substrate temperature the grain size jumped to 500 nm. Iridium silicide was found in the film deposited at 700°C substrate temperature. This indicated a critical deposition temperature between 600 and 700°C. A 50 mK platform was built for low temperature measurements. At low temperature, the Residual Resistance Ratio (RRR) of the Ir thin films had a typical value of 1.50. A typical transition curve of the film showed a transition temperature higher and wider than expected.

  5. Chemical-Vapor-Deposited Diamond Film

    NASA Technical Reports Server (NTRS)

    Miyoshi, Kazuhisa

    1999-01-01

    This chapter describes the nature of clean and contaminated diamond surfaces, Chemical-vapor-deposited (CVD) diamond film deposition technology, analytical techniques and the results of research on CVD diamond films, and the general properties of CVD diamond films. Further, it describes the friction and wear properties of CVD diamond films in the atmosphere, in a controlled nitrogen environment, and in an ultra-high-vacuum environment.

  6. Thermochromic properties of Sn, W co-doped VO2 nanostructured thin film deposited by pulsed laser deposition.

    PubMed

    Hur, M G; Masaki, T; Yoon, D H

    2014-12-01

    Tin (Sn) and tungsten (W) co-doped vanadium dioxide (VO2) nanostructured thin films with 50-nm thickness were deposited by pulsed laser deposition (PLD) to reduce the transition temperature and improve the IR transmittance. The crystal structure of the nanostructured thin films and the presence of elements were evaluated by XRD and XPS analysis. The transition temperature (T(c)) of 1 at% Sn-1 at% W co-doped VO2 nanostructured thin film was decreased to about 22 degrees C (from 70.3 to 48.5 degrees C) compared with the undoped VO2 nanostructured thin film. The transmittance width in the IR range of the co-doped nanostructured thin film decreased from 37.5% to 27% compared with the undoped VO2 nanostructured thin film. Also, the width of hysteresis was narrowed by Sn doping.

  7. Influence of defects and processing parameters on the properties of indium tin oxide films on polyethylene napthalate substrate

    SciTech Connect

    Han, H.; Zoo, Yeongseok; Bhagat, S. K.; Lewis, J. S.; Alford, T. L.

    2007-09-15

    Indium tin oxide (ITO) thin films were deposited on polyethylene napthalate (PEN) by rf sputtering using different rf powers (60 and 120 W) and at different substrate temperatures (room temperature and 100 deg. C). Selected PEN substrates were pretreated using an Ar plasma before ITO sputter deposition. Rutherford backscattering spectrometry was used to determine the oxygen content in the films. Hall effect measurements were used to evaluate the electrical properties. In this paper the influence of defect structure, sputtering conditions, and the effect of annealing on the electrical and optical properties of ITO on PEN have been investigated. Electrical properties such as carrier concentration, mobility, and resistivity of the ITO films varied with rf power and substrate temperature. The electrical and optical properties of the films changed after annealing in air. This study also describes how the as-deposited amorphous ITO changes from amorphous to crystalline as a result of heat treatment, and investigates the effects of Sn defect clustering on electrical and optical properties of the ITO films.

  8. Effects of Loading Frequency and Film Thickness on the Mechanical Behavior of Nanoscale TiN Film

    NASA Astrophysics Data System (ADS)

    Liu, Jin-na; Xu, Bin-shi; Wang, Hai-dou; Cui, Xiu-fang; Jin, Guo; Xing, Zhi-guo

    2017-08-01

    The mechanical properties of a nanoscale-thickness film material determine its reliability and service life. To achieve quantitative detection of film material mechanical performance based on nanoscale mechanical testing methods and to explore the influence of loading frequency of the cycle load on the fatigue test, a TiN film was prepared on monocrystalline silicon by magnetron sputtering. The microstructure of the nanoscale-thickness film material was characterized by using scanning electron microscopy and high-resolution transmission electron microscopy. The residual stress distribution of the thin film was obtained by using an electronic film stress tester. The hardness values and the fatigue behavior were measured by using a nanomechanical tester. Combined with finite element simulation, the paper analyzed the influence of the film thickness and loading frequency on the deformation, as well as the equivalent stress and strain. The results showed that the TiN film was a typical face-centered cubic structure with a large amount of amorphous. The residual compressive stress decreased gradually with increasing thin film thickness, and the influence of the substrate on the elastic modulus and hardness was also reduced. A greater load frequency would accelerate the dynamic fatigue damage that occurs in TiN films.

  9. Influence of high power impulse magnetron sputtering plasma ionization on the microstructure of TiN thin films

    SciTech Connect

    Ehiasarian, A. P.; Vetushka, A.; Gonzalvo, Y. Aranda; Safran, G.; Szekely, L.; Barna, P. B.

    2011-05-15

    HIPIMS (High Power Impulse Magnetron Sputtering) discharge is a new PVD technology for the deposition of high-quality thin films. The deposition flux contains a high degree of metal ionization and nitrogen dissociation. The microstructure of HIPIMS-deposited nitride films is denser compared to conventional sputter technologies. However, the mechanisms acting on the microstructure, texture and properties have not been discussed in detail so far. In this study, the growth of TiN by HIPIMS of Ti in mixed Ar and N{sub 2} atmosphere has been investigated. Varying degrees of metal ionization and nitrogen dissociation were produced by increasing the peak discharge current (I{sub d}) from 5 to 30 A. The average power was maintained constant by adjusting the frequency. Mass spectrometry measurements of the deposition flux revealed a high content of ionized film-forming species, such as Ti{sup 1+}, Ti{sup 2+} and atomic nitrogen N{sup 1+}. Ti{sup 1+} ions with energies up to 50 eV were detected during the pulse with reducing energy in the pulse-off times. Langmuir probe measurements showed that the peak plasma density during the pulse was 3 x 10{sup 16} m{sup -3}. Plasma density, and ion flux ratios of N{sup 1+}: N{sub 2}{sup 1+} and Ti{sup 1+}: Ti{sup 0} increased linearly with peak current. The ratios exceeded 1 at 30 A. TiN films deposited by HIPIMS were analyzed by X-ray diffraction, and transmission electron microscopy. At high I{sub d}, N{sup 1+}: N{sub 2}{sup 1+} > 1 and Ti{sup 1+}: Ti{sup 0} > 1 were produced; a strong 002 texture was present and column boundaries in the films were atomically tight. As I{sub d} reduced and N{sup 1+}: N{sub 2}{sup 1+} and Ti{sup 1+}: Ti{sup 0} dropped below 1, the film texture switched to strong 111 with a dense structure. At very low I{sub d}, porosity between columns developed. The effects of the significant activation of the deposition flux observed in the HIPIMS discharge on the film texture, microstructure, morphology and

  10. Pulsed laser deposition: Prospects for commercial deposition of epitaxial films

    SciTech Connect

    Muenchausen, R.E.

    1999-03-01

    Pulsed laser deposition (PLD) is a physical vapor deposition (PVD) technique for the deposition of thin films. The vapor source is induced by the flash evaporation that occurs when a laser pulse of sufficient intensity (about 100 MW/cm{sup 2}) is absorbed by a target. In this paper the author briefly defines pulsed laser deposition, current applications, research directed at gaining a better understanding of the pulsed laser deposition process, and suggests some future directions to enable commercial applications.

  11. Effect of gas ratio on tribological properties of sputter deposited TiN coatings

    NASA Astrophysics Data System (ADS)

    Chavda, Mahesh R.; Chauhan, Kamlesh V.; Rawal, Sushant K.

    2016-05-01

    Titanium nitride (TiN) coatings were deposited on Si, corning glass, pins of mild steel (MS, ϕ3mm), aluminium (Al, ϕ4mm) and brass (ϕ6mm) substratesby DC magnetron sputtering. The argon and nitrogen (Ar:N2)gas ratio was precisely controlled by Mass Flow Controller (MFC) and was varied systematically at diffract values of 10:10,12:08, 16:04 and 18:02sccm. The structural properties of TiN coatings were characterized by X-ray diffraction (XRD) and its surface topography was studied using field emission scanning electron microscopy (FE-SEM). The tribological properties of TiN coatings were investigated using pin-on-disc tribometer.

  12. Pulsed Nd-YAG laser deposition of TiN and TiAlN coating

    NASA Astrophysics Data System (ADS)

    Kathuria, Y. P.; Uchida, Yoshiyuki

    This paper demonstrates the feasibility of generating a thin clad coating of TiN and TiAlN on SS304 base material by using the pulsed Nd-YAG laser. In the experiment TiN based coating was created with and without the addition of Al-powder. In the post processing, a precision grinder was employed to smoothen the top surface. SEM, XRD and EDS analysis were employed to study the surface topography etc. Microhardness mapping was performed at various points across the surface. The results show the average microhardness of the coating deposited with TiN is lower (1035 HV) than that of using Al-mixed powder (1264 HV).

  13. Effect of gas ratio on tribological properties of sputter deposited TiN coatings

    SciTech Connect

    Chavda, Mahesh R.; Chauhan, Kamlesh V.; Rawal, Sushant K.

    2016-05-06

    Titanium nitride (TiN) coatings were deposited on Si, corning glass, pins of mild steel (MS, ϕ3mm), aluminium (Al, ϕ4mm) and brass (ϕ6mm) substratesby DC magnetron sputtering. The argon and nitrogen (Ar:N{sub 2})gas ratio was precisely controlled by Mass Flow Controller (MFC) and was varied systematically at diffract values of 10:10,12:08, 16:04 and 18:02sccm. The structural properties of TiN coatings were characterized by X-ray diffraction (XRD) and its surface topography was studied using field emission scanning electron microscopy (FE-SEM). The tribological properties of TiN coatings were investigated using pin-on-disc tribometer.

  14. Properties of Hydrogen Sulfide Sensors Based on Thin Films of Tin Dioxide and Tungsten Trioxide

    NASA Astrophysics Data System (ADS)

    Sevastianov, E. Yu.; Maksimova, N. K.; Chernikov, E. V.; Sergeichenko, N. V.; Rudov, F. V.

    2016-12-01

    The effect of hydrogen sulfide in the concentration range of 0-100 ppm on the characteristics of thin films of tin dioxide and tungsten trioxide obtained by the methods of magnetron deposition and modified with gold in the bulk and on the surface is studied. The impurities of antimony and nickel have been additionally introduced into the SnO2 bulk. An optimal operating temperature of sensors 350°C was determined, at which there is a satisfactory correlation between the values of the response to H2S and the response time. Degradation of the sensor characteristics is investigated in the long-term ( 0.5-1.5 years) tests at operating temperature and periodic exposure to hydrogen sulfide, as well as after conservation of samples in the laboratory air. It is shown that for the fabrication of H2S sensors, the most promising are thin nanocrystalline Au/WO3:Au films characterized by a linear concentration dependence of the response and high stability of parameters during exploitation.

  15. Structural characterization and electronic structure of laser treated TiN thin film

    NASA Astrophysics Data System (ADS)

    Soni, Sheetal; Nair, K. G. M.; Phase, D. M.; Gupta, Ratnesh

    2012-06-01

    TiN thin films prepared by laser treatment using Kr-F excimer laser in the controlled atmosphere. The depth distribution and composition of nitrogen and contaminated oxygen have been determined by non-Rutherford proton backscattering using 1.7 MeV Tendetron accelerator. The electronic structure of TiN thin film have been characterized by resonant photoelectron spectroscopy using indus-I synchrotron radiation. Specifically, complex resonance profile that shows the enhancement at 45 eV which is consistent with the resonant photoemission of Ti 3d states involved in the Titanium nitride and oxide.

  16. Carbon nanohoops as attractive toughening and lubricant agents in TiN porous films

    NASA Astrophysics Data System (ADS)

    Zheng, Jianyun; Ren, Xiaodong; Hao, Junying; Li, Ang; Liu, Weimin

    2017-01-01

    Hoop-shaped conjugated macrocycles (or carbon nanohoops) are eliciting significant interest from theoretical and synthetic scientists on account of their eminent physical and chemical properties. Herein, carbon nanohoops firstly fabricated by CH4 plasma treatment serve as toughening and lubricant agents in TiN porous films. The formation mechanism of carbon nanohoops is explained through a tandem Suzuki coupling/macrocyclization sequence of the charged multiple hydrocarbon molecules. The essential features of carbon nanohoops ensure that the TiN porous films with carbon nanohoops successfully possess flexible, hard, lubricant and antiwear effects.

  17. Structural characterization and electronic structure of laser treated TiN thin film

    SciTech Connect

    Soni, Sheetal; Nair, K. G. M.; Phase, D. M.; Gupta, Ratnesh

    2012-06-05

    TiN thin films prepared by laser treatment using Kr-F excimer laser in the controlled atmosphere. The depth distribution and composition of nitrogen and contaminated oxygen have been determined by non-Rutherford proton backscattering using 1.7 MeV Tendetron accelerator. The electronic structure of TiN thin film have been characterized by resonant photoelectron spectroscopy using indus-I synchrotron radiation. Specifically, complex resonance profile that shows the enhancement at 45 eV which is consistent with the resonant photoemission of Ti 3d states involved in the Titanium nitride and oxide.

  18. Room temperature crystallization of indium tin oxide films on glass and polyethylene terephthalate substrates using rf plasma

    SciTech Connect

    Ohsaki, H.; Suzuki, M.; Shibayama, Y.; Kinbara, A.; Watanabe, T.

    2007-07-15

    The crystallization of amorphous indium tin oxide (ITO) films was achieved by rf (13.56 MHz) plasma treatment. Although the films were crystallized after 2 min, the sample temperature was lower than 90 deg. C without compulsory cooling even after 10 min of treatment and polyethylene terephthalate (PET) substrates had no damage. Plasma-crystallized sputtered ITO films have a bixbite structure and the resistivity reached to 1.6x10{sup -4} {omega}{center_dot}cm. ITO thin films have almost the same resistivity in both cases of PET and glass substrates used and plasma-treated PET ITO films have a bit higher resistivity than that of glass ITO films, while mass spectroscopy measurements indicated that ITO films deposited on PET substrates are expected to include no apparent gas species ejected from PET substrate. It was found that the plasma gas pressure is the key parameter for the effective crystallization and the appropriate gas pressure depends on the plasma gas species.

  19. Tin-tungsten mineralizing processes in tungsten vein deposits: Panasqueira, Portugal

    NASA Astrophysics Data System (ADS)

    Lecumberri-Sanchez, P.; Pinto, F.; Vieira, R.; Wälle, M.; Heinrich, C. A.

    2015-12-01

    Tungsten has a high heat resistance, density and hardness, which makes it widely applied in industry (e.g. steel, tungsten carbides). Tungsten deposits are typically magmatic-hydrothermal systems. Despite the economic significance of tungsten, there are no modern quantitative analytical studies of the fluids responsible for the formation of its highest-grade deposit type (tungsten vein deposits). Panasqueira (Portugal) is a tungsten vein deposit, one of the leading tungsten producers in Europe and one of the best geologically characterized tungsten vein deposits. In this study, compositions of the mineralizing fluids at Panasqueira have been determined through combination of detailed petrography, microthermometric measurements and LA-ICPMS analyses, and geochemical modeling has been used to determine the processes that lead to tungsten mineralization. We characterized the fluids related to the various mineralizing stages in the system: the oxide stage (tin and tungsten mineralization), the sulfide stage (chalcopyrite and sphalerite mineralization) and the carbonate stage. Thus, our results provide information on the properties of fluids related with specific paragenetic stages. Furthermore we used those fluid compositions in combination with host rock mineralogy and chemistry to evaluate which are the controlling factors in the mineralizing process. This study provides the first quantitative analytical data on fluid composition for tungsten vein deposits and evaluates the controlling mineralization processes helping to determine the mechanisms of formation of the Panasqueira tin-tungsten deposit and providing additional geochemical constraints on the local distribution of mineralization.

  20. (110)-oriented indium tin oxide films grown on m- and r-plane sapphire substrates

    NASA Astrophysics Data System (ADS)

    Chern, Ming-Yau; Lu, Tso-Wen; Xu, Wei-Lun

    2015-04-01

    Indium tin oxide (ITO) thin films have been deposited by pulsed laser deposition on m-plane (100) and r-plane (012) sapphire substrates. For both substrates, the films were grown with their [110] direction perpendicular to the substrate planes under the conditions of high growth temperature and high oxygen pressure. Their in-plane epitaxial relations with the substrates were identified to be ITO[001] ∥ Al2O3[020] and \\text{ITO}[1\\bar{1}0]\\parallel \\text{Al}2\\text{O}3[001] for the m-plane substrate. For the r-plane substrate, two types of lattice matching were observed: one being \\text{ITO}[001]\\parallel \\text{Al}2\\text{O}3[2,1, - 1/2] and \\text{ITO}[1\\bar{1}0]\\parallel \\text{Al}2\\text{O}3[4/3, - 4/3,2/3], the other being \\text{ITO}[001]\\parallel \\text{Al}2\\text{O}3[1, - 1,1/2] and \\text{ITO}[1\\bar{1}0]/\\text{Al}2\\text{O}3[8/3,4/3, - 2/3]. The electrical properties were measured by the Hall effect and van der Pauw methods at room temperature. All of the samples have low electrical resistivity on the order of 3.0 × 10-4 Ω cm, high carrier concentration of about 2.5 × 1020 cm-3, and mobility ranging from 70 to 90 cm2 V-1 s-1.

  1. Surface enhanced Raman scattering activity of TiN thin film prepared via nitridation of sol-gel derived TiO2 film

    NASA Astrophysics Data System (ADS)

    Dong, Zhanliang; Wei, Hengyong; Chen, Ying; Wang, Ruisheng; Zhao, Junhong; Lin, Jian; Bu, Jinglong; Wei, Yingna; Cui, Yi; Yu, Yun

    2015-10-01

    Surface-enhanced Raman scattering (SERS) is a powerful and non-destructive analytical technique tool for chemical and biological sensing applications. Metal-free SERS substrates have recently been developed by using semiconductor nanostructures. The optical property of TiN film is similar to that of gold. Besides that, its good chemical inertness and thermodynamic stability make TiN thin film an excellent candidate for SERS. In order to investigate its SERS activity, the TiN thin film was successfully prepared via direct nitridation of the sol-gel derived TiO2 thin film on the quartz substrate using ammonia gas as reducing agent. The crystallite structures and morphology of TiN thin film were determined by XRD, RAMAN and FE-SEM. The results show that the thin film obtained is cubic titanium nitride with a lattice parameter of 4.2349 Å. The surface of TiN thin film is rough and with the particles of 50 nm in average sizes. The thickness of TiN thin film is about 130 nm. The TiN thin film displays a surface Plasmon resonance absorption peak at around 476 nm, which can lead to a strong enhancement of the EM field on the interface. The Raman signal of the probe molecule R6G was greatly enhanced through TiN thin film substrates. The enhancement factor is about 4.1×103 and the detection limit achieves 10-6 M for R6G. The TiN thin film substrate also shows a good reproducibility of SERS performance. The results indicate that TiN thin film is an attractive material with potential application in SERS substrates.

  2. Patterned indium tin oxide nanofiber films and their electrical and optical performance

    NASA Astrophysics Data System (ADS)

    Miftahul Munir, Muhammad; Widiyandari, Hendri; Iskandar, Ferry; Okuyama, Kikuo

    2008-09-01

    We report on the preparation and characterization of indium tin oxide (ITO) nanofiber films with a patterned architecture that are transparent and conductive with a uniform fiber size. ITO nanofiber films with a crisscross pattern were prepared by the electrospinning of a precursor solution containing ethanol, dimethyl formamide (DMF), indium chloride tetrahydrate, tin chloride pentahydrate and poly(vinyl pyrrolidone) (PVP K90) onto a metal mesh template, followed by calcinations after transfer to a glass substrate. The resulting ITO nanofibers had diameters of the order of 100 nm and were composed of single-crystalline nanoparticles that were pure in chemical composition. The morphology, crystallinity and performance of the resulting nanofibers could be controlled mainly by calcination. Optical and electrical investigations demonstrated that these nanofiber films are transparent conductors with an optical transmittance as high as 92%. The resulting patterned ITO nanofiber films would be suitable for applications such as solar cells, sensors and electromagnetic field filters.

  3. Effect of plasma molybdenized buffer layer on adhesive properties of TiN film coated on Ti6Al4V alloy

    NASA Astrophysics Data System (ADS)

    Qin, Lin; Yi, Hong; Kong, Fanyou; Ma, Hua; Guo, Lili; Tian, Linhai; Tang, Bin

    2017-05-01

    Effect of molybdenized buffer layer on adhesion strength of TiN film on Ti6Al4V alloy was investigated. The buffer layer composed of a dense molybdenum deposition layer, a rapid drop zone and a slow fall zone was prepared using double glow plasma surface alloying technique. Scratch tests and low energy repeated impact tests were adopted to comparatively evaluate the duplex treated layers and the single TiN samples. The results show that the critical load was increased from 62 N for the single TiN film to over 100 N for the duplex treated layer. The volume of impact pit, formed in impact tests, of the single TiN samples is 9.15 × 106 μm3, and about 1.5 times than that of the duplex treated samples. The Leeb hardness values reveal that about 70% impact energy was transferred to the single TiN samples to generate permanent deformation, while that was only about 47% for the duplex treated samples. The mechanism of improving adhesion strength is attributed to synergistic effect due to an inverted-S shape elastic modulus distribution produced by the molybdenized layer.

  4. Porous copper zinc tin sulfide thin film as photocathode for double junction photoelectrochemical solar cells.

    PubMed

    Dai, Pengcheng; Zhang, Guan; Chen, Yuncheng; Jiang, Hechun; Feng, Zhenyu; Lin, Zhaojun; Zhan, Jinhua

    2012-03-21

    Porous copper zinc tin sulfide (CZTS) thin film was prepared via a solvothermal approach. Compared with conventional dye-sensitized solar cells (DSSCs), double junction photoelectrochemical cells using dye-sensitized n-type TiO(2) (DS-TiO(2)) as the photoanode and porous p-type CZTS film as the photocathode shows an increased short circuit current, external quantum efficiency and power conversion efficiency.

  5. Defect engineered d{sup 0} ferromagnetism in tin-doped indium oxide nanostructures and nanocrystalline thin-films

    SciTech Connect

    Khan, Gobinda Gopal E-mail: sghoshphysics@gmail.com; Sarkar, Ayan; Ghosh, Shyamsundar E-mail: sghoshphysics@gmail.com; Mandal, Guruprasad; Mukherjee, Goutam Dev; Manju, Unnikrishnan; Banu, Nasrin; Dev, Bhupendra Nath

    2015-08-21

    Origin of unexpected defect engineered room-temperature ferromagnetism observed in tin-doped indium oxide (ITO) nanostructures (Nanowires, Nano-combs) and nanocrystalline thin films fabricated by pulsed laser deposition has been investigated. It is found that the ITO nanostructures prepared under argon environment exhibit strongest ferromagnetic signature as compared to that nanocrystalline thin films grown at oxygen. The evidence of singly ionized oxygen vacancy (V{sub 0}{sup +}) defects, obtained from various spectroscopic measurements, suggests that such V{sub 0}{sup +} defects are mainly responsible for the intrinsic ferromagnetic ordering. The exchange interaction of the defects provides extensive opportunity to tune the room-temperature d{sup 0} ferromagnetism and optical properties of ITOs.

  6. The Tribological Behaviors of Three Films Coated on Biomedical Titanium Alloy by Chemical Vapor Deposition

    NASA Astrophysics Data System (ADS)

    Wang, Song; Liao, Zhenhua; Liu, Yuhong; Liu, Weiqiang

    2015-11-01

    Three thin films (DLC, a-C, and TiN) were performed on Ti6Al4V by chemical vapor deposition. Carbon ion implantation was pretreated for DLC and a-C films while Ti transition layer was pretreated for TiN film to strengthen the bonding strength. X-ray diffraction, Raman measurement, nano-hardness and nano-scratch tester, and cross-section etching by FIB method were used to analyze film characteristics. Tribological behaviors of these coatings were studied by articulation with both ZrO2 and UHMWPE balls using ball-on-disk sliding. The thickness values reached ~0.46, ~0.33, and ~1.67 μm for DLC, a-C, and TiN film, respectively. Nano-hardness of the coatings compared with that of untreated and bonding strength (critical load in nano-scratch test) values of composite coatings compared with that of monolayer film all increased significantly, respectively. Under destructive test (ZrO2 ball conterface) in bovine serum lubrication, TiN coating revealed the best wear resistance while DLC showed the worst. Film failure was mainly attributed to the plowing by hard ZrO2 ball characterized by abrasive and adhesive wear. Under normal test (UHMWPE ball conterface), all coatings showed significant improvement in wear resistance both in dry sliding and bovine serum lubrication. Both DLC and a-C films showed less surface damage than TiN film due to the self-lubricating phenomenon in dry sliding. TiN film showed the largest friction coefficient both in destructive and normal tests, devoting to the big TiN grains thus leading to much rougher surface and then a higher value. The self-lubricating film formed on DLC and a-C coating could also decrease their friction coefficients. The results indicated that three coatings revealed different wear mechanisms, and thick DLC or a-C film was more promising in application in lower stress conditions such as artificial cervical disk.

  7. Performance improvement of tin-doped zinc oxide thin-film transistor by novel channel modulation layer of indium tin oxide/tin zinc oxide

    NASA Astrophysics Data System (ADS)

    Chen, Zhuofa; Han, Dedong; Zhao, Nannan; Wu, Jing; Cong, Yingying; Dong, Junchen; Zhao, Feilong; Zhang, Shengdong; Zhang, Xing; Wang, Yi; Liu, Lifeng

    2015-04-01

    By applying a novel active modulation layer of indium tin oxide/tin zinc oxide (ITO/TZO), we have successfully fabricated high-performance bottom-gate-type dual-active-layer thin-film transistors (TFTs) on a glass substrate at a low temperature by a simple process. The as-fabricated dual-active-layer ITO/TZO TFTs exhibited excellent electrical properties compared with single-active-layer TZO TFTs. We found that the dual-layer ITO/TZO TFT with an optimized stack structure of ITO (5 nm)/TZO (45 nm) as the channel layer exhibits excellent properties, namely, a high saturation mobility of 204 cm2 V-1 s-1, a steep subthreshold slope of 219 mV/dec, a low threshold voltage of 0.8 V, and a high on-off current ratio of 4.3 × 107. A physical mechanism for the electrical improvement is also deduced. Owing to its advantages, namely, a low processing temperature, a high electrical performance, a simple process, and a low cost, this novel active modulation layer is highly promising for the manufacture of oxide semiconductor TFT and transparent displays.

  8. Deposition of thin films of multicomponent materials

    NASA Technical Reports Server (NTRS)

    Thakoor, Sarita (Inventor)

    1993-01-01

    Composite films of multicomponent materials, such as oxides and nitrides, e.g., lead zirconate titanate, are deposited by dc magnetron sputtering, employing a rotating substrate holder, which rotates relative to a plurality of targets, one target for each metal element of the multicomponent material. The sputtering is carried out in a reactive atmosphere. The substrates on which the layers are deposited are at ambient temperature. Following deposition of the composite film, the film is heated to a temperature sufficient to initiate a solid state reaction and form the final product, which is substantially single phase and substantially homogeneous.

  9. Homogeneous superconducting phase in TiN film: A complex impedance study

    NASA Astrophysics Data System (ADS)

    Diener, P.; Schellevis, H.; Baselmans, J. J. A.

    2012-12-01

    The low frequency complex impedance of a high resistivity 92 μ Ω cm and 100 nm thick TiN superconducting film has been measured via the transmission of several high sensitivity GHz microresonators, down to TC/50. The temperature dependence of the kinetic inductance follows closely BCS local electrodynamics, with one well defined superconducting gap. This evidences the recovery of a homogeneous superconducting phase in TiN far from the disorder and composition driven transitions. Additionally, we observe a linearity between resonator quality factor and frequency temperature changes, which can be described by a two fluid model.

  10. Toward an Understanding of Thin-Film Transistor Performance in Solution-Processed Amorphous Zinc Tin Oxide (ZTO) Thin Films.

    PubMed

    Sanctis, Shawn; Koslowski, Nico; Hoffmann, Rudolf; Guhl, Conrad; Erdem, Emre; Weber, Stefan; Schneider, Jörg J

    2017-06-28

    Amorphous zinc tin oxide (ZTO) thin films are accessible by a molecular precursor approach using mononuclear zinc(II) and tin(II) compounds with methoxyiminopropionic acid ligands. Solution processing of two precursor solutions containing a mixture of zinc and tin(II)-methoxyiminopropinato complexes results in the formation of smooth homogeneous thin films, which upon calcination are converted into the desired semiconducting amorphous ZTO thin films. ZTO films integrated within a field-effect transistor (FET) device exhibit an active semiconducting behavior in the temperature range between 250 and 400 °C, giving an increased performance, with mobility values between μ = 0.03 and 5.5 cm(2)/V s, with on/off ratios increasing from 10(5) to 10(8) when going from 250 to 400 °C. Herein, our main emphasis, however, was on an improved understanding of the material transformation pathway from weak to high performance of the semiconductor in a solution-processed FET as a function of the processing temperature. We have correlated this with the chemical composition and defects states within the microstructure of the obtained ZTO thin film via photoelectron spectroscopy (X-ray photoelectron spectroscopy, ultraviolet photoelectron spectroscopy), Auger electron spectroscopy, electron paramagnetic resonance spectroscopy, atomic force microscopy, and photoluminescence investigations. The critical factor observed for the improved performance within this ZTO material could be attributed to a higher tin concentration, wherein the contributions of point defects arising from the tin oxide within the final amorphous ZTO material play the dominant role in governing the transistor performance.

  11. Drop-photochemical deposition of aluminum oxide thin films from aqueous solutions

    NASA Astrophysics Data System (ADS)

    Sato, Shunta; Ichimura, Masaya

    2017-04-01

    Aluminum oxide thin films were deposited onto fluorine-doped tin oxide-coated glass by drop photochemical deposition for the first time. The deposition solution was deionized water containing aluminum sulfate and sodium thiosulfate. Small amount of the solution was dropped on the substrate and irradiated with UV light. The solution was replaced with new one after 5 min irradiation, and the process was repeated 10 times. A film was not deposited without thiosulfate ions in the solution. The deposited films were transparent, and their band gap was larger than 4 eV. The O/Al composition ratio was about 1.2, smaller than the stoichiometric ratio 1.5.

  12. Reactive ion etching of indium-tin oxide films by CCl4-based Inductivity Coupled Plasma

    NASA Astrophysics Data System (ADS)

    Juneja, Sucheta; Poletayev, Sergey D.; Fomchenkov, Sergey; Khonina, Svetlana N.; Skidanov, Roman V.; Kazanskiy, Nikolay L.

    2016-08-01

    Indium tin oxide (ITO) films have been a subject of extensive studies in fabrication of micro-electronic devices for opto-electronic applications ranging from anti-reflection coatings to transparent contacts in photovoltaic devices. In this paper, a new and effective way of reactive ion etching of a conducting indium-tin oxide (ITO) film with Carbon tetrachloride (CCl4) has been investigated. CCl4 plasma containing an addition of gases mixture of dissociated argon and oxygen were used. Oxygen is added to increase the etchant percentage whereas argon was used for stabilization of plasma. The etching characteristics obtained with these gaseous mixtures were explained based on plasma etch chemistry and etching regime of ITO films. An etch rate as high as ∼20 nm/min can be achieved with a controlled process parameter such as power density, total flow rate, composition of reactive gases gas and pressure. Our Investigation represents some of the extensive work in this area.

  13. Molybdenum as a contact material in zinc tin oxide thin film transistors

    SciTech Connect

    Hu, W.; Peterson, R. L.

    2014-05-12

    Amorphous oxide semiconductors are of increasing interest for a variety of thin film electronics applications. Here, the contact properties of different source/drain electrode materials to solution-processed amorphous zinc tin oxide (ZTO) thin-film transistors are studied using the transmission line method. The width-normalized contact resistance between ZTO and sputtered molybdenum is measured to be 8.7 Ω-cm, which is 10, 20, and 600 times smaller than that of gold/titanium, indium tin oxide, and evaporated molybdenum electrodes, respectively. The superior contact formed using sputtered molybdenum is due to a favorable work function lineup, an insulator-free interface, bombardment of ZTO during molybdenum sputtering, and trap-assisted tunneling. The transfer length of the sputtered molybdenum/ZTO contact is 0.34 μm, opening the door to future radio-frequency sub-micron molybdenum/ZTO thin film transistors.

  14. Continuous Microreactor-Assisted Solution Deposition for Scalable Production of CdS Films

    SciTech Connect

    Ramprasad, Sudhir; Su, Yu-Wei; Chang, Chih-Hung; Paul, Brian; Palo, Daniel R.

    2013-06-13

    Solution deposition offers an attractive, low temperature option in the cost effective production of thin film solar cells. Continuous microreactor-assisted solution deposition (MASD) was used to produce nanocrystalline cadmium sulfide (CdS) films on fluorine doped tin oxide (FTO) coated glass substrates with excellent uniformity. We report a novel liquid coating technique using a ceramic rod to efficiently and uniformly apply reactive solution to large substrates (152 mm × 152 mm). This technique represents an inexpensive approach to utilize the MASD on the substrate for uniform growth of CdS films. Nano-crystalline CdS films have been produced from liquid phase at ~90°C, with average thicknesses of 70 nm to 230 nm and with a 5 to 12% thickness variation. The CdS films produced were characterized by UV-Vis spectroscopy, transmission electron microscopy, and X-Ray diffraction to demonstrate their suitability to thin-film solar technology.

  15. Effect of Bias Voltage on the Fatigue Life of Martensitic Stainless Steel with TiN Film Coated Using Arc Ion Plating Method

    NASA Astrophysics Data System (ADS)

    Fukui, Satoshi; Yonekura, Daisuke; Murakami, Ri-Ichi

    To investigate the effect of TiN coating on the fatigue strength of high-strength steel, four-point bending fatigue tests were carried out for martensitic stainless steel with TiN film coated using arc ion plating (AIP) method. A 2-μm-thick TiN film was deposited onto the substrate surface under bias voltage of four kinds: VB = 0, -60, -160 and -260 V. For VB = 0, -160 V and -260 V, the fatigue limit increased. The highest fatigue limit of σmax = 900 MPa was obtained for VB = -160 V. But some samples for VB = -260 V showed the decrease of fatigue limit due to film delamination during the fatigue test. For VB = -60 V, the fatigue limit was unchanged by coating. As a result of a coating property analysis, the following conclusions were obtained. Fatigue crack propagation was almost independent of the bias voltage. Fatigue crack initiated from the subsurface in the substrate and the crack initiation behavior depended on the film property of the adhesion, residual stress, elastic modulus, and the film's hardness depended on the bias voltage especially for low fatigue stress level.

  16. Limits of ZnO Electrodeposition in Mesoporous Tin Doped Indium Oxide Films in View of Application in Dye-Sensitized Solar Cells.

    PubMed

    Dunkel, Christian; von Graberg, Till; Smarsly, Bernd M; Oekermann, Torsten; Wark, Michael

    2014-04-23

    Well-ordered 3D mesoporous indium tin oxide (ITO) films obtained by a templated sol-gel route are discussed as conductive porous current collectors. This paper explores the use of such films modified by electrochemical deposition of zinc oxide (ZnO) on the pore walls to improve the electron transport in dye-sensitized solar cells (DSSCs). Mesoporous ITO film were dip-coated with pore sizes of 20-25 nm and 40-45 nm employing novel poly(isobutylene)-b-poly(ethylene oxide) block copolymers as structure-directors. After electrochemical deposition of ZnO and sensitization with the indoline dye D149 the films were tested as photoanodes in DSSCs. Short ZnO deposition times led to strong back reaction of photogenerated electrons from non-covered ITO to the electrolyte. ITO films with larger pores enabled longer ZnO deposition times before pore blocking occurred, resulting in higher efficiencies, which could be further increased by using thicker ITO films consisting of five layers, but were still lower compared to nanoporous ZnO films electrodeposited on flat ITO. The major factors that currently limit the application are the still low thickness of the mesoporous ITO films, too small pore sizes and non-ideal geometries that do not allow obtaining full coverage of the ITO surface with ZnO before pore blocking occurs.

  17. Limits of ZnO Electrodeposition in Mesoporous Tin Doped Indium Oxide Films in View of Application in Dye-Sensitized Solar Cells

    PubMed Central

    Dunkel, Christian; von Graberg, Till; Smarsly, Bernd M.; Oekermann, Torsten; Wark, Michael

    2014-01-01

    Well-ordered 3D mesoporous indium tin oxide (ITO) films obtained by a templated sol-gel route are discussed as conductive porous current collectors. This paper explores the use of such films modified by electrochemical deposition of zinc oxide (ZnO) on the pore walls to improve the electron transport in dye-sensitized solar cells (DSSCs). Mesoporous ITO film were dip-coated with pore sizes of 20–25 nm and 40–45 nm employing novel poly(isobutylene)-b-poly(ethylene oxide) block copolymers as structure-directors. After electrochemical deposition of ZnO and sensitization with the indoline dye D149 the films were tested as photoanodes in DSSCs. Short ZnO deposition times led to strong back reaction of photogenerated electrons from non-covered ITO to the electrolyte. ITO films with larger pores enabled longer ZnO deposition times before pore blocking occurred, resulting in higher efficiencies, which could be further increased by using thicker ITO films consisting of five layers, but were still lower compared to nanoporous ZnO films electrodeposited on flat ITO. The major factors that currently limit the application are the still low thickness of the mesoporous ITO films, too small pore sizes and non-ideal geometries that do not allow obtaining full coverage of the ITO surface with ZnO before pore blocking occurs. PMID:28788618

  18. Physicochemical characterization of point defects in fluorine doped tin oxide films

    SciTech Connect

    El Akkad, Fikry; Joseph, Sudeep

    2012-07-15

    The physical and chemical properties of spray deposited FTO films are studied using FESEM, x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), electrical and optical measurements. The results of XRD measurements showed that the films are polycrystalline (grain size 20-50 nm) with Rutile structure and mixed preferred orientation along the (200) and (110) planes. An angular shift of the XRD peaks after F-doping is observed and interpreted as being due to the formation of substitutional fluorine defects (F{sub O}) in presence of high concentration of oxygen vacancies (V{sub O}) that are electrically neutral. The electrical neutrality of oxygen vacancies is supported by the observation that the electron concentration n is two orders of magnitude lower than the V{sub O} concentration calculated from chemical analyses using XPS measurements. It is shown that an agreement between XPS, XRD, and Hall effect results is possible provided that the degree of deviation from stoichiometry is calculated with the assumption that the major part of the bulk carbon content is involved in O-C bonds. High temperature thermal annealing is found to cause an increase in the F{sub O} concentration and a decrease in both n and V{sub O} concentrations with the increase of the annealing temperature. These results could be interpreted in terms of a high temperature chemical exchange reaction between the SnO{sub 2} matrix and a precipitated fluoride phase. In this reaction, fluorine is released to the matrix and Sn is trapped by the fluoride phase, thus creating substitutional fluorine F{sub O} and tin vacancy V{sub Sn} defects. The enthalpy of this reaction is determined to be approximately 2.4 eV while the energy of formation of a V{sub Sn} through the migration of Sn{sub Sn} host atom to the fluoride phase is approximately 0.45 eV.

  19. Physicochemical characterization of point defects in fluorine doped tin oxide films

    NASA Astrophysics Data System (ADS)

    Akkad, Fikry El; Joseph, Sudeep

    2012-07-01

    The physical and chemical properties of spray deposited FTO films are studied using FESEM, x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), electrical and optical measurements. The results of XRD measurements showed that the films are polycrystalline (grain size 20-50 nm) with Rutile structure and mixed preferred orientation along the (200) and (110) planes. An angular shift of the XRD peaks after F-doping is observed and interpreted as being due to the formation of substitutional fluorine defects (FO) in presence of high concentration of oxygen vacancies (VO) that are electrically neutral. The electrical neutrality of oxygen vacancies is supported by the observation that the electron concentration n is two orders of magnitude lower than the VO concentration calculated from chemical analyses using XPS measurements. It is shown that an agreement between XPS, XRD, and Hall effect results is possible provided that the degree of deviation from stoichiometry is calculated with the assumption that the major part of the bulk carbon content is involved in O-C bonds. High temperature thermal annealing is found to cause an increase in the FO concentration and a decrease in both n and VO concentrations with the increase of the annealing temperature. These results could be interpreted in terms of a high temperature chemical exchange reaction between the SnO2 matrix and a precipitated fluoride phase. In this reaction, fluorine is released to the matrix and Sn is trapped by the fluoride phase, thus creating substitutional fluorine FO and tin vacancy VSn defects. The enthalpy of this reaction is determined to be approximately 2.4 eV while the energy of formation of a VSn through the migration of SnSn host atom to the fluoride phase is approximately 0.45 eV.

  20. Investigation of TiN thin film oxidation depending on the substrate temperature at vacuum break

    SciTech Connect

    Piallat, Fabien; Gassilloud, Remy; Caubet, Pierre; Vallée, Christophe

    2016-09-15

    Due to the reduction of the thickness of the layers used in the advanced technology nodes, there is a growing importance of the surface phenomena in the definition of the general properties of the materials. One of the least controlled and understood phenomenon is the oxidation of metals after deposition, at the vacuum break. In this study, the influence of the sample temperature at vacuum break on the oxidation level of TiN deposited by metalorganic chemical vapor deposition is investigated. TiN resistivity appears to be lower for samples which underwent vacuum break at high temperature. Using X-ray photoelectron spectrometry analysis, this change is correlated to the higher oxidation of the TiN layer. Moreover, angle resolved XPS analysis reveals that higher is the temperature at the vacuum break, higher is the surface oxidation of the sample. This surface oxidation is in turn limiting the diffusion of oxygen in the volume of the layer. Additionally, evolution of TiN layers resistivity was monitored in time and it shows that resistivity increases until a plateau is reached after about 10 days, with the lowest temperature at vacuum break resulting in the highest increase, i.e., the resistivity of the sample released to atmosphere at high temperature increased by a factor 1.7 whereas the resistivity of the sample cooled down under vacuum temperature increased by a factor 2.7.

  1. Liquid phase deposition of electrochromic thin films

    SciTech Connect

    Richardson, Thomas J.; Rubin, Michael D.

    2000-08-18

    Thin films of titanium, zirconium and nickel oxides were deposited on conductive SnO2:F glass substrates by immersion in aqueous solutions. The films are transparent, conformal, of uniform thickness and appearance, and adhere strongly to the substrates. On electrochemical cycling, TiO2, mixed TiO2-ZrO2, and NiOx films exhibited stable electrochromism with high coloration efficiencies. These nickel oxide films were particularly stable compared with films prepared by other non-vacuum techniques. The method is simple, inexpensive, energy efficient, and readily scalable to larger substrates.

  2. Periodic oxidation for fabricating titanium oxynitride thin films via atomic layer deposition

    SciTech Connect

    Iwashita, Shinya Aoyama, Shintaro; Nasu, Masayuki; Shimomura, Kouji; Noro, Naotaka; Hasegawa, Toshio; Akasaka, Yasushi; Miyashita, Kohei

    2016-01-15

    This paper demonstrates thermal atomic layer deposition (ALD) combined with periodic oxidation for synthesizing titanium oxynitride (TiON) thin films. The process used a typical ALD reactor for the synthesis of titanium nitride (TiN) films wherein oxygen was supplied periodically between the ALD-TiN cycles. The great advantage of the process proposed here was that it allowed the TiN films to be oxidized efficiently. Also, a uniform depth profile of the oxygen concentration in the films could be obtained by tuning the oxidation conditions, allowing the process to produce a wide variety of TiON films. The resistivity measurement is a convenient method to confirm the reproducibility of metal film fabrication but may not be applicable for TiON films depending upon the oxidation condition because the films can easily turn into insulators when subjected to periodic oxidation. Therefore, an alternative reproducibility confirmation method was required. In this study, spectroscopic ellipsometry was applied to monitor the variation of TiON films and was able to detect changes in film structures such as conductor–insulator transitions in the TiON films.

  3. Enhanced Bactericidal Activity of Silver Thin Films Deposited via Aerosol-Assisted Chemical Vapor Deposition.

    PubMed

    Ponja, Sapna D; Sehmi, Sandeep K; Allan, Elaine; MacRobert, Alexander J; Parkin, Ivan P; Carmalt, Claire J

    2015-12-30

    Silver thin films were deposited on SiO2-barrier-coated float glass, fluorine-doped tin oxide (FTO) glass, Activ glass, and TiO2-coated float glass via AACVD using silver nitrate at 350 °C. The films were annealed at 600 °C and analyzed by X-ray powder diffraction, X-ray photoelectron spectroscopy, UV/vis/near-IR spectroscopy, and scanning electron microscopy. All the films were crystalline, and the silver was present in its elemental form and of nanometer dimension. The antibacterial activity of these samples was tested against Escherichia coli and Staphylococcus aureus in the dark and under UV light (365 nm). All Ag-deposited films reduced the numbers of E. coli by 99.9% within 6 h and the numbers of S. aureus by 99.9% within only 2 h. FTO/Ag reduced bacterial numbers of E. coli to below the detection limit after 60 min and caused a 99.9% reduction of S. aureus within only 15 min of UV irradiation. Activ/Ag reduced the numbers of S. aureus by 66.6% after 60 min and TiO2/Ag killed 99.9% of S. aureus within 60 min of UV exposure. More remarkably, we observed a 99.9% reduction in the numbers of E. coli within 6 h and the numbers of S. aureus within 4 h in the dark using our novel TiO2/Ag system.

  4. Structural properties of indium tin oxide thin films prepared for application in solar cells

    SciTech Connect

    Gheidari, A. Mohammadi; Mohajerzadeh, S.; Shams-Kolahi, W.

    2005-08-11

    Indium tin oxide (ITO) thin films prepared by rf sputtering were annealed in several temperatures. The electrical, optical and structural properties of these films are systematically investigated. The post annealing of the samples lead to considerably higher electrical conductivity, better optical transparency and larger grain size for the films. In an optimum annealing temperature of 400 deg. C, we have found that a maximized conductivity of films is achieved without a remarkable loss in their transparency. The sheet resistance of 2.3 {omega}/{open_square} and average grain size of 30 nm, are the results of the optimized post processing of films. The investigation for microstructure of films investigated by X-ray diffraction measurement (XRD) shows that a preferential crystal growth toward the (2 2 2) orientation takes place when the annealing temperature increases to 400 deg. C.

  5. Atomistic aspects of carrier concentration variation in post-annealed indium tin oxide films

    NASA Astrophysics Data System (ADS)

    Kim, Ji-Woong; Kim, Hyegyeong; Lee, Min-Young; Lee, Doo-Yong; Lee, Ji-Sung; Jang, Yun Hyeong; Bae, Jong-Seong; Lee, Jeong-Soo; Park, Sungkyun

    2015-10-01

    Post-annealing environment-dependent optical and electrical properties of indium tin oxide films grown on glass were examined. X-ray diffraction measurements revealed that all of the films exhibited poly-crystallinity after annealing at 400 °C for 10 min O2, in-air and N2. The optical property measurements yielded  >80% transmittances for all the films except for the as-grown and O2-annealed films, even though there were no significant optical band-gap energy differences. In the Hall measurements, all of the films exhibited n-type characteristics. However, the film annealed under the N2 environment showed the best electrical properties (highest carrier concentration and conductivity). The physical origin of electrical property variations due to annealing environment differences was explained by examining the core-level x-ray photoelectron spectra.

  6. Electrochemical deposition of high density gold nanoparticles on indium/tin oxide electrode for fabrication of biosensors.

    PubMed

    Yu, Xiuping; Wang, Liping; Di, Junwei

    2011-12-01

    High density gold nanoparticles (GNPs) on indium tin oxide (ITO) film coated glass have been prepared by one-step electrochemical deposition from KAu(CN)2 in phosphate buffer (pH 8.0) solution. The resulting electrode surface was characterized by scanning electron microscopy (SEM), UV-vis spectroscopy, X-ray diffraction (XRD) and electrochemical method. Experimental results revealed that the number density of the nanoparticles was increased by the negative shift of the applied potential, while the coverage of the deposited GNPs on ITO substrate surface was also increased by means of the increasing deposition cycles. The presence of GNPs with high coverage improved the electrochemical response of Fe(CN)6 (3-/4-). This high coverage GNP/ITO substrate was applied to immobilization superoxide dismutase (SOD) for fabrication of electrochemical biosensors. The direct electron transfer between enzyme and electrode was realized, and the electrochemical performance of the SOD electrode was improved with the high coverage of GNPs. The biosensor exhibited a rapid and high response to superoxide anion.

  7. Thin Film Deposition Using Energetic Ions

    PubMed Central

    Manova, Darina; Gerlach, Jürgen W.; Mändl, Stephan

    2010-01-01

    One important recent trend in deposition technology is the continuous expansion of available processes towards higher ion assistance with the subsequent beneficial effects to film properties. Nowadays, a multitude of processes, including laser ablation and deposition, vacuum arc deposition, ion assisted deposition, high power impulse magnetron sputtering and plasma immersion ion implantation, are available. However, there are obstacles to overcome in all technologies, including line-of-sight processes, particle contaminations and low growth rates, which lead to ongoing process refinements and development of new methods. Concerning the deposited thin films, control of energetic ion bombardment leads to improved adhesion, reduced substrate temperatures, control of intrinsic stress within the films as well as adjustment of surface texture, phase formation and nanotopography. This review illustrates recent trends for both areas; plasma process and solid state surface processes. PMID:28883323

  8. A study of reactive plasma deposited thin films

    NASA Technical Reports Server (NTRS)

    Gilchrist, J.; Williams, E.

    1986-01-01

    A state-of-the-art research laboratory was established to grow and characterize amorphous thin films that are useful in semi-conductor devices. Two film systems, nitride films and silicon dioxide films were studied. Over seventy deposition runs for nitride films were made. The films were deposited on silicon substrate using plasma enhanced chemical vapor deposition. It was found that the uniformity of the films were affected by the location of the film on the platen.

  9. Effect of cationic/anionic organic surfactants on evaporation induced self assembled tin oxide nanostructured films

    NASA Astrophysics Data System (ADS)

    Khun Khun, Kamalpreet; Mahajan, Aman; Bedi, R. K.

    2011-01-01

    Tin oxide nanostructures with well defined morphologies have been obtained through an evaporation induced self assembly process. The technique has been employed using an ultrasonic nebulizer for production of aersol and its subsequent deposition onto a heated glass substrate. The precursor used for aersol production was modified by introducing cationic and anionic surfactants namely cetyl trimethyl ammonium bromide and sodium dodecyl sulphate respectively. The effect of surfactants on the structural, electrical and optical properties of self assembled tin oxide nanostructures were investigated by using X-ray diffraction, field emission scanning electroscope microscopy, two probe technique and photoluminiscence studies. The results reveal that high concentration of surfactants in the precursor solution leads to reduction in crystallite size with significant changes in the morphology of tin oxide nanostructures. Photoluminiscence studies of the nanostructures show emissions in the visible region which exhibit marked changes in the intensities upon variation of surfactants in the precursor solutions.

  10. Metal film deposition by laser breakdown chemical vapor deposition

    SciTech Connect

    Jervis, T.R.

    1985-01-01

    Dielectric breakdown of gas mixtures can be used to deposit homogeneous thin films by chemical vapor deposition with appropriate control of flow and pressure conditions to suppress gas phase nucleation and particle formation. Using a pulsed CO/sub 2/ laser operating at 10.6 microns where there is no significant resonant absorption in any of the source gases, we have succeeded in depositing homogeneous films from several gas phase precursors by gas phase laser pyrolysis. Nickel and molybdenum from the respective carbonyls and tungsten from the hexafluoride have been examined to date. In each case the gas precursor is buffered to reduce the partial pressure of the reactants and to induce breakdown. The films are spectrally reflective and uniform over a large area. Films have been characterized by Auger electron spectroscopy, x-ray diffraction, pull tests, and resistivity measurements. The highest quality films have resulted from the nickel depositions. Detailed x-ray diffraction analysis of these films yields a very small domain size (approx. 50 A) consistent with rapid quenching from the gas phase reaction zone. This analysis also shows nickel carbide formation consistent with the temperature of the reaction zone and the Auger electron spectroscopy results which show some carbon and oxygen incorporation (8% and 1% respectively). Gas phase transport and condensation of the molybdenum carbonyl results in substantial carbon and oxygen contamination of the molybdenum films requiring heated substrates, a requirement not consistent with the goals of the program to maximize the quench rate of the deposition. Results from tungsten deposition experiments representing a reduction chemistry instead of the decomposition chemistry involved in the carbonyl experiments are also reported.

  11. Metal film deposition by laser breakdown chemical vapor deposition

    NASA Astrophysics Data System (ADS)

    Jervis, T. R.

    1985-01-01

    Dielectric breakdown of gas mixtures can be used to deposit homogeneous thin films by chemical vapor deposition with appropriate control of flow and pressure conditions to suppress gas phase nucleation and particle formation. Using a pulsed CO2 laser operating at 10.6 microns where there is no significant resonant absorption in any of the source gases, we have succeeded in depositing homogeneous films from several gas phase precursors by gas phase laser pyrolysis. Nickel and molybdenum from the respective carbonyls and tungsten from the hexafluoride have been examined to date. In each case the gas precursor is buffered to reduce the partial pressure of the reactants and to induce breakdown. The films are spectrally reflective and uniform over a large area. Films have been characterized by Auger electron spectroscopy, X-ray diffraction, pull tests, and resistivity measurements. The highest quality films have resulted from the nickel depositions. Detailed X-ray diffraction analysis of these films yields a very small domain size (approx. 50 A) consistent with rapid quenching from the gas phase reaction zone. This analysis also shows nickel carbide formation consistent with the temperature of the reaction zone and the Auger electron spectroscopy results which show some carbon and oxygen incorporation (8% and 1% respectively). Gas phase transport and condensation of the molybdenum carbonyl results in substantial carbon and oxygen contamination of the molybdenum films requiring heated substrates, a requirement not consistent with the goals of the program to maximize the quench rate of the deposition. Results from tungsten deposition experiments representing a reduction chemistry instead of the decomposition chemistry involved in the carbonyl experiments are also reported.

  12. Tailoring the structural and optical properties of TiN thin films by Ag ion implantation

    NASA Astrophysics Data System (ADS)

    Popović, M.; Novaković, M.; Rakočević, Z.; Bibić, N.

    2016-12-01

    Titanium nitride (TiN) thin films thickness of ∼260 nm prepared by dc reactive sputtering were irradiated with 200 keV silver (Ag) ions to the fluences ranging from 5 × 1015 ions/cm2 to 20 × 1015 ions/cm2. After implantation TiN layers were annealed 2 h at 700 °C in a vacuum. Ion irradiation-induced microstructural changes were examined by using Rutherford backscattering spectrometry, X-ray diffraction and transmission electron microscopy, while the surface topography was observed using atomic force microscopy. Spectroscopic ellipsometry was employed to get insights on the optical and electronic properties of TiN films with respect to their microstructure. The results showed that the irradiations lead to deformation of the lattice, increasing disorder and formation of new Ag phase. The optical results demonstrate the contribution of surface plasmon resonace (SPR) of Ag particles. SPR position shifted in the range of 354.3-476.9 nm when Ag ion fluence varied from 5 × 1015 ions/cm2 to 20 × 1015 ions/cm2. Shift in peak wavelength shows dependence on Ag particles concentration, suggesting that interaction between Ag particles dominate the surface plasmon resonance effect. Presence of Ag as second metal in the layer leads to overall decrease of optical resistivity of TiN.

  13. Electrochromic Property of MoO3 Thin Films Deposited by Chemical Vapor Transport Synthesis

    NASA Astrophysics Data System (ADS)

    Kim, Dae-Gun; Kim, Se Hoon; Do Kim, Young

    2011-10-01

    The transmittance of electrochromic MoO3 thin films by chemical vapor transport (CVT) deposition and post-annealing on indium tin oxide (ITO) glass reached 80% with low reflectivity. Optical analysis demonstrated a 3.60 eV band gap energy in MoO3 thin film. Transmittance changes of 50% between coloration and decoloration (˜30 and ˜80%) at 533 nm under the bias change frequency revealed reversible electrochromic properties and stability. A coloration efficiency of the annealed MoO3 thin film was 23.7 cm2/C. Coloration responsibility was predominant with reliable performances by bias change.

  14. Ion plating technique improves thin film deposition

    NASA Technical Reports Server (NTRS)

    Mattox, D. M.

    1968-01-01

    Ion plating technique keeps the substrate surface clean until the film is deposited, allows extensive diffusion and chemical reaction, and joins insoluble or incompatible materials. The technique involves the deposition of ions on the substrate surface while it is being bombarded with inert gas ions.

  15. Multicomponent Nanostructured Thin Films. Deposition, Characterization, Testing and Application

    NASA Astrophysics Data System (ADS)

    Shtansky, D. V.

    The current topics related to the deposition, characterization, testing and application of tribological coatings are reviewed and refer to our recent results on nanostructured (Ti,Cr)-(Al,Si,Zr,Ca)-(C,B,N,O) thin films. The PVD targets based on the systems TiN+TiB2, TiB2+TiC, Ti5Si3+Ti, Ti5Si3+TiN, TiB2+Ti5Si3+Si, TiB2+Si, Ti5Si3+TiC, TiAl+TiC, TiB+Ti9Cr4B+Cr2Ti, CrB2, TiB2+TiAl+Ti2AlN, TiC+Ti3SiC2+TiSi2, TiC0.5+ZrO2, TiC0.5+CaO, Ti5Si3+ZrO2 were manufactured by means of self-propagating high-temperature synthesis (SHS). The BN and WSex films were deposited using a sintered hexagonal BN and a cold pressed WSe2 target, respectively. Multicomponent films were deposited by DC magnetron sputtering of composite targets either in an atmosphere of argon or reactively in a gaseous mixture of argon and nitrogen. The WSe2 films were deposited by PLD and ion-assisted PLD techniques. The microstructure and chemical composition of the films were studied by means of Auger electron spectroscopy (AES), energy-dispersive X-ray spectroscopy (EDXS), X-ray diffraction (XRD), scanning and transmission electron microscopy (SEM and TEM), high-resolution (HR) TEM, X-ray photoelectron spectroscopy (XPS), and electron energy-loss spectroscopy (EELS). The films were also characterized in terms of their hardness, elastic modulus, elastic recovery, adhesion, surface topography, friction and wear. Particular attention was paid to the analysis of the structure of the films in the nanometric scale and the evaluation of the properties of the individual nanostructures. Three groups of films are considered: 1) nanostructured hard, tribological coatings for civilian engineering Ti-B-N, Ti-Cr-B-N, Ti-Si-N, Ti-Al-B-N, Ti-Si-C-N, Ti-Si-B-N, BN and Cr-B-N; 2) double-layer self-lubricating coatings for civilian air force and space industry WSex/TiC, WSex/TiCN, WSex/TiSiN and 3) biocompatible coatings for medicine Ti-Ca-C-N-O, Ti-Zr-C-N-O, and Ti-Zr-Si-O-N.

  16. In situ electro-mechanical experiments and mechanics modeling of tensile cracking in indium tin oxide thin films on polyimide substrates

    NASA Astrophysics Data System (ADS)

    Peng, Cheng; Jia, Zheng; Bianculli, Dan; Li, Teng; Lou, Jun

    2011-05-01

    Indium tin oxide (ITO) thin films supported by polymer substrates have been widely used as transparent electrodes/interconnects in flexible electronics. Understanding the electro-mechanical behaviors of such material system is crucial for reliable operation of flexible devices under large deformation. In this paper, we performed in situ mechanical and electrical tests of ITO thin films with two different thicknesses (200 and 80 nm) deposited on polyimide substrates inside a scanning electron microscope. The crack initiation and propagation, crack density evolution and the corresponding electrical resistance variation were systematically investigated. It was found that cracks initiated at a higher tensile strain level and saturated with a higher density in thinner ITO films. Integrated with a coherently formulated mechanics model, the cohesive toughness and fracture strength of ITO thin films and the ITO/polyimide interfacial toughness were quantitatively determined. The experimentally observed thickness dependence of the saturated crack density in ITO thin films was also quantitatively verified by the model.

  17. Characteristics Of Vacuum Deposited Sucrose Thin Films

    NASA Astrophysics Data System (ADS)

    Ungureanu, F.; Predoi, D.; Ghita, R. V.; Vatasescu-Balcan, R. A.; Costache, M.

    Thin films of sucrose (C12H22O11) were deposited on thin cut glass substrates by thermal evaporation technique (p ~ 10-5 torr). The surface morphology was putted into evidence by FT-IR and SEM analysis. The experimental results confirm a uniform deposition of an adherent sucrose layer. The biological tests (e.g., cell morphology and cell viability evaluated by measuring mitochondrial dehydrogenise activity with MTT assay) confirm the properties of sucrose thin films as bioactive material. The human fetal osteoblast system grown on thin sucrose film was used for the determination of cell proliferation, cell viability and cell morphology studies.

  18. Carrier interactions and porosity initiated reversal of temperature dependence of thermal conduction in nanoscale tin films

    SciTech Connect

    Kaul, Pankaj B.; Prakash, Vikas

    2014-01-14

    Recently, tin has been identified as an attractive electrode material for energy storage/conversion technologies. Tin thin films have also been utilized as an important constituent of thermal interface materials in thermal management applications. In this regards, in the present paper, we investigate thermal conductivity of two nanoscale tin films, (i) with thickness 500 ± 50 nm and 0.45% porosity and (ii) with thickness 100 ± 20 nm and 12.21% porosity. Thermal transport in these films is characterized over the temperature range from 40 K–310 K, using a three-omega method for multilayer configurations. The experimental results are compared with analytical predictions obtained by considering both phonon and electron contributions to heat conduction as described by existing frequency-dependent phenomenological models and BvK dispersion for phonons. The thermal conductivity of the thicker tin film (500 nm) is measured to be 46.2 W/m-K at 300 K and is observed to increase with reduced temperatures; the mechanisms for thermal transport are understood to be governed by strong phonon-electron interactions in addition to the normal phonon-phonon interactions within the temperature range 160 K–300 K. In the case of the tin thin film with 100 nm thickness, porosity and electron-boundary scattering supersede carrier interactions, and a reversal in the thermal conductivity trend with reduced temperatures is observed; the thermal conductivity falls to 1.83 W/m-K at 40 K from its room temperature value of 36.1 W/m-K. In order to interpret the experimental results, we utilize the existing analytical models that account for contributions of electron-boundary scattering using the Mayadas-Shatzkes and Fuchs-Sondheimer models for the thin and thick films, respectively. Moreover, the effects of porosity on carrier transport are included using a previous treatment based on phonon radiative transport involving frequency-dependent mean free paths

  19. Growth feature of ionic nitrogen doped CNx bilayer films with Ti and TiN interlayer by pulse cathode arc discharge

    NASA Astrophysics Data System (ADS)

    Zhou, Bing; Liu, Zhubo; Piliptsou, D. G.; Rogachev, A. V.; Yu, Shengwang; Wu, Yanxia; Tang, Bin; Rudenkov, A. S.

    2016-01-01

    Using nano-scaled Ti and TiN as interlayer, ionic nitrogen doped carbon (CNx (N+)) bilayer films were prepared at various pulse frequencies by cathode arc technique. Elemental distribution at the interface, bonding compositions, microstructure, and mechanical properties of CNx (N+) bilayer films were investigated in dependence of interlayer and pulse frequency by Auger electron spectroscopy, X-ray photoelectron spectroscopy, Raman spectroscopy, nanoindentation, and surface profilometer. The results showed that the diffusion extent of C atoms at the interface of CNx (N+) bilayers is higher than for the α-C and CNx (N2) bilayers with the same interlayer. Nitrogen atoms could diffuse throughout the pre-deposited Ti and TiN layers into the Si substrate for all CNx (N+) bilayers. Ti interlayer facilitates the introduction of N atoms into the CNx (N+) films and exhibits a certain catalytic effect on the coordination of N atoms with sp2- and sp3-C binding. More nitrogenated and intense CN bonding configurations (mainly graphite-like N) form in the TiN/CNx (N+) bilayer. Ti/CNx (N+) bilayer prepared at low frequency possesses small size and disordering of Csp2 clusters but TiN interlayer weakens the formation of Csp2 bonding and increases the disordering of Csp2 clusters in the films. The residual stress in the bilayer is lower than for CNx (N+) monolayer. The higher hardness and the lower residual stress are present in the TiN/CNx (N+, 10 Hz) bilayer.

  20. Hard Carbon Films Deposited under Various Atmospheres

    NASA Astrophysics Data System (ADS)

    Wei, M.-K.; Chen, S.-C.; Wu, T. C.; Lee, Sanboh

    1998-03-01

    Using a carbon target ablated with an XeCl-excimer laser under various gas atmospheres at different pressures, hard carbon was deposited on silicon, iron and tungsten carbide substrates. The hardness, friction coefficient, and wear rate of the film against steel are better than pure substrate material, respectively, so that it has potential to be used as a protective coating for micromechanical elements. The influences of gas pressure, gas atmosphere, and power density of laser irradiation on the thermal stability of film were analyzed by means of Raman-spectroscope, time-of-flight method, and optical emission spectrum. It was found that the film deposited under higher pressure has less diamond-like character. The film deposited under rest gas or argon atmosphere was very unstable and looked like a little graphite-like character. The film deposited at high vacuum (10-5 mbar rest gas) was the most stable and looked like the most diamond-like character. The film deposited at higher power density was more diamond-like than that at lower power density.

  1. Ion beam sputter deposited zinc telluride films

    NASA Technical Reports Server (NTRS)

    Gulino, D. A.

    1986-01-01

    Zinc telluride is of interest as a potential electronic device material, particularly as one component in an amorphous superlattice, which is a new class of interesting and potentially useful materials. Some structural and electronic properties of ZnTe films deposited by argon ion beam sputter deposition are described. Films (up to 3000 angstroms thick) were deposited from a ZnTe target. A beam energy of 1000 eV and a current density of 4 mA/sq cm resulted in deposition rates of approximately 70 angstroms/min. The optical band gap was found to be approximately 1.1 eV, indicating an amorphous structure, as compared to a literature value of 2.26 eV for crystalline material. Intrinsic stress measurements showed a thickness dependence, varying from tensile for thicknesses below 850 angstroms to compressive for larger thicknesses. Room temperature conductivity measurement also showed a thickness dependence, with values ranging from 1.86 x 10 to the -6th/ohm cm for 300 angstrom film to 2.56 x 10 to the -1/ohm cm for a 2600 angstrom film. Measurement of the temperature dependence of the conductivity for these films showed complicated behavior which was thickness dependent. Thinner films showed at least two distinct temperature dependent conductivity mechanisms, as described by a Mott-type model. Thicker films showed only one principal conductivity mechanism, similar to what might be expected for a material with more crystalline character.

  2. TiN films fabricated by reactive gas pulse sputtering: A hybrid design of multilayered and compositionally graded structures

    NASA Astrophysics Data System (ADS)

    Yang, Jijun; Zhang, Feifei; Wan, Qiang; Lu, Chenyang; Peng, Mingjing; Liao, Jiali; Yang, Yuanyou; Wang, Lumin; Liu, Ning

    2016-12-01

    Reactive gas pulse (RGP) sputtering approach was used to prepare TiN thin films through periodically changing the N2/Ar gas flow ratio. The obtained RGPsbnd TiN film possessed a hybrid architecture containing compositionally graded and multilayered structures, composed of hcp Ti-phase and fcc TiN-phase sublayers. Meanwhile, the RGP-TiN film exhibited a composition-oscillation along the film thickness direction, where the Ti-phase sublayer had a compositional gradient and the TiN-phase retained a constant stoichiometric ratio of Ti:N ≈ 1. The film modulation ratio λ (the thicknesses ratio of the Ti and TiN-phase sublayer) can be effectively tuned by controlling the undulation behavior of the N2 partial flow rate. Detailed analysis showed that this hybrid structure originated from a periodic transition of the film growth mode during the reactive sputtering process.

  3. Surface measurement of indium tin oxide thin film by wavelength-tuning Fizeau interferometry.

    PubMed

    Kim, Yangjin; Hibino, Kenichi; Sugita, Naohiko; Mitsuishi, Mamoru

    2015-08-10

    Indium-tin oxide (ITO) thin films have been widely used in displays such as liquid crystal displays and touch panels because of their favorable electrical conductivity and optical transparency. The surface shape and thickness of ITO thin films must be precisely measured to improve their reliability and performance. Conventional measurement techniques take single point measurements and require expensive systems. In this paper, we measure the surface shape of an ITO thin film on top of a transparent plate using wavelength-tuning Fizeau interferometry. The surface shape was determined by compensating for the phase error introduced by optical interference from the thin film, which was calculated using the phase and amplitude distributions measured by wavelength-tuning. The proposed measurement method achieved noncontact, large-aperture, and precise measurements of transparent thin films. The surface shape of the sample was experimentally measured to an accuracy of 5.13 nm.

  4. Ag films grown by remote plasma enhanced atomic layer deposition on different substrates

    SciTech Connect

    Amusan, Akinwumi A. Kalkofen, Bodo; Burte, Edmund P.; Gargouri, Hassan; Wandel, Klaus; Pinnow, Cay; Lisker, Marco

    2016-01-15

    Silver (Ag) layers were deposited by remote plasma enhanced atomic layer deposition (PALD) using Ag(fod)(PEt{sub 3}) (fod = 2,2-dimethyl-6,6,7,7,8,8,8-heptafluorooctane-3,5-dionato) as precursor and hydrogen plasma on silicon substrate covered with thin films of SiO{sub 2}, TiN, Ti/TiN, Co, Ni, and W at different deposition temperatures from 70  to 200 °C. The deposited silver films were analyzed by x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM) with energy dispersive x-ray spectroscopy, four point probe measurement, ellipsometric measurement, x-ray fluorescence (XRF), and x-ray diffraction (XRD). XPS revealed pure Ag with carbon and oxygen contamination close to the detection limit after 30 s argon sputtering for depositions made at 120 and 200 °C substrate temperatures. However, an oxygen contamination was detected in the Ag film deposited at 70 °C after 12 s argon sputtering. A resistivity of 5.7 × 10{sup −6} Ω cm was obtained for approximately 97 nm Ag film on SiO{sub 2}/Si substrate. The thickness was determined from the SEM cross section on the SiO{sub 2}/Si substrate and also compared with XRF measurements. Polycrystalline cubic Ag reflections were identified from XRD for PALD Ag films deposited at 120 and 200 °C. Compared to W surface, where poor adhesion of the films was found, Co, Ni, TiN, Ti/TiN and SiO{sub 2} surfaces had better adhesion for silver films as revealed by SEM, TEM, and AFM images.

  5. Metal film deposition by laser breakdown chemical vapor deposition

    SciTech Connect

    Jervis, T. R.; Newkirk, L. R.

    1986-06-01

    Dielectric breakdown of gas mixtures can be used to deposit thin films by chemical vapor deposition with appropriate control of flow and pressure conditions to suppress gas-phase nucleation and particle formation. Using a pulsed CO/sub 2/ laser operating at 10.6 ..mu.. where there is no significant resonant absorption in any of the source gases, homogeneous films from several gas-phase precursors have been sucessfully deposited by gas-phase laser pyrolysis. Nickel and molybdenum from the respective carbonyls representing decomposition chemistry and tungsten from the hexafluoride representing reduction chemistry have been demonstrated. In each case the gas precursor is buffered with argon to reduce the partial pressure of the reactants and to induce breakdown. Films have been characterized by Auger electron spectroscopy, x-ray diffraction, transmission electron microscopy, pull tests, and resistivity measurements. The highest quality films have resulted from the nickel depositions. Detailed x-ray diffraction analysis of these films yields a very small domain size consistent with the low temperature of the substrate and the formation of metastable nickel carbide. Transmission electron microscopy supports this analysis.

  6. Surface potential measurement of n-type organic semiconductor thin films by mist deposition via Kelvin probe microscopy

    NASA Astrophysics Data System (ADS)

    Odaka, Akihiro; Satoh, Nobuo; Katori, Shigetaka

    2017-08-01

    We partially deposited fullerene (C60) and phenyl-C61-butyric acid methyl ester thin films that are typical n-type semiconductor materials on indium-tin oxide by mist deposition at various substrate temperatures. The topographic and surface potential images were observed via dynamic force microscopy/Kelvin probe force microscopy with the frequency modulation detection method. We proved that the area where a thin film is deposited depends on the substrate temperature during deposition from the topographic images. It was also found that the surface potential depends on the substrate temperature from the surface potential images.

  7. The cis-bis(decanoate)tin phthalocyanine/DPPC film at the air/water interface.

    PubMed

    Ramos, Salvador; Garza, Cristina; Beltran, Hiram I; Campos-Terán, José; Arenas-Alatorre, Jesús; Castillo, Rolando

    2012-03-01

    Films made of cis-bis-decanoate-tin(IV) phthalocyanine (PcSn10) and racemic dipalmitoylphosphatidylcholine (DPPC) are studied with compression isotherms and Brewster angle microscopy (BAM) at the air/water interface. Films enriched in PcSn10 present phase separation elliptical-shaped domains. These domains present optical anisotropy and molecular order. They are enriched in PcSn10, and the film outside these domains is enriched in DPPC, as shown in by high-angle annular dark-field transmission electron microscopy on Langmuir-Blodgett (LB) transferred films. Film collapse area and atomic force microscopy images of LB transferred films on mica indicate that the films are actually multilayers. A computational survey was performed to determine how the PcSn10 molecules prefer to self-assemble, in films basically made of PcSn10. The relative energetic stability for several dimeric assemblies was obtained, and a crystal model of the film was developed through packing and repeating the PcSn10 molecules, along the crystallographic directions of the unit cell. Our results contribute to understanding the strong interaction between PcSn10 and DPPC at the air/water interface, where even small quantities of DPPC (~1-2%) can modify the film in an important way.

  8. Laser patterning of very thin indium tin oxide thin films on PET substrates

    NASA Astrophysics Data System (ADS)

    McDonnell, C.; Milne, D.; Prieto, C.; Chan, H.; Rostohar, D.; O'Connor, G. M.

    2015-12-01

    This work investigates the film removal properties of 30 nm thick Indium Tin Oxide (ITO) thin films, on flexible polyethylene terephthalate (PET) substrates, using 355, 532 and 1064 nm nanosecond pulses (ns), and 343 and 1064 nm femtosecond pulses. The ablation threshold was found to be dependent on the applied wavelength and pulse duration. The surface topography of the laser induced features were examined using atomic force microscopy across the range of wavelengths and pulse durations. The peak temperature, strain and stress tensors were examined in the film and substrate during laser heating, using finite element computational methods. Selective removal of the thin ITO film from the polymer substrate is possible at all wavelengths except at 266 nm, were damage to substrate is observed. The damage to the substrate results in periodic surface structures (LIPPS) on the exposed PET, with a period of twice the incident wavelength. Fragmented crater edges are observed at all nanosecond pulse durations. Film removal using 1030 nm femtosecond pulses results in clean crater edges, however, minor 5 nm damage to the substrate is also observed. The key results show that film removal for ITO on PET, is through film de-lamination across all wavelengths and pulse durations. Film de-lamination occurs due to thermo-elastic stress at the film substrate interface region, as the polymer substrate expands under heating from direct laser absorption and heat conduction across the film substrate interface.

  9. Ion beam sputter deposited zinc telluride films

    NASA Technical Reports Server (NTRS)

    Gulino, D. A.

    1985-01-01

    Zinc telluride is of interest as a potential electronic device material, particularly as one component in an amorphous superlattice, which is a new class of interesting and potentially useful materials. Some structural and electronic properties of ZnTe films deposited by argon ion beam sputter depoairion are described. Films (up to 3000 angstroms thick) were deposited from a ZnTe target. A beam energy of 1000 eV and a current density of 4 mA/sq. cm. resulted in deposition rates of approximately 70 angstroms/min. The optical band gap was found to be approximately 1.1 eV, indicating an amorphous structure, as compared to a literature value of 2.26 eV for crystalline material. Intrinsic stress measurements showed a thickness dependence, varying from tensile for thicknesses below 850 angstroms to compressive for larger thicknesses. Room temperature conductivity measurement also showed a thickness dependence, with values ranging from 1.86 x to to the -6/ohm. cm. for 300 angstrom film to 2.56 x 10 to the -1/ohm. cm. for a 2600 angstrom film. Measurement of the temperature dependence of the conductivity for these films showed complicated behavior which was thickness dependent. Thinner films showed at least two distinct temperature dependent conductivity mechanisms, as described by a Mott-type model. Thicker films showed only one principal conductivity mechanism, similar to what might be expected for a material with more crystalline character.

  10. Electrochromism in sputter deposited W1-y MoyO3 thin films

    NASA Astrophysics Data System (ADS)

    Arvizu, M. A.; Granqvist, C. G.; Niklasson, G. A.

    2016-02-01

    Electrochromic (EC) properties of tungsten-molybdenum oxide (W1-y MoyO3) thin films were investigated. The films were deposited on indium tin oxide covered glass by reactive DC sputtering from tungsten and molybdenum targets. Elemental compositions of the W1-y MoyO3 films were determined by Rutherford back scattering. Voltammetric cycling was performed in an electrolyte of 1 M LiClO4 in propylene carbonate. An increase in molybdenum content in the EC films caused both a shift towards higher energies and a lowering of the maximum of the optical absorption band, as compared with WO3 EC films. Durability under electrochemical cycling was diminished for W1-y MoyO3 EC films.

  11. Effect of ambient combinations of argon, oxygen, and hydrogen on the properties of DC magnetron sputtered indium tin oxide films

    NASA Astrophysics Data System (ADS)

    Marikkannan, M.; Subramanian, M.; Mayandi, J.; Tanemura, M.; Vishnukanthan, V.; Pearce, J. M.

    2015-01-01

    Sputtering has been well-developed industrially with singular ambient gases including neutral argon (Ar), oxygen (O2), hydrogen (H2) and nitrogen (N2) to enhance the electrical and optical performances of indium tin oxide (ITO) films. Recent preliminary investigation into the use of combined ambient gases such as an Ar+O2+H2 ambient mixture, which was suitable for producing high-quality (low sheet resistance and high optical transmittance) of ITO films. To build on this promising preliminary work and develop deeper insight into the effect of ambient atmospheres on ITO film growth, this study provides a more detailed investigation of the effects of ambient combinations of Ar, O2, H2 on sputtered ITO films. Thin films of ITO were deposited on glass substrates by DC magnetron sputtering using three different ambient combinations: Ar, Ar+O2 and Ar+O2+H2. The structural, electrical and optical properties of the three ambient sputtered ITO films were systematically characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), Raman spectroscopy, four probe electrical conductivity and optical spectroscopy. The XRD and Raman studies confirmed the cubic indium oxide structure, which is polycrystalline at room temperature for all the samples. AFM shows the minimum surface roughness of 2.7 nm for Ar+O2+H2 sputtered thin film material. The thickness of the films was determined by the cross sectional SEM analysis and its thickness was varied from 920 to 817 nm. The columnar growth of ITO films was also discussed here. The electrical and optical measurements of Ar+O2+H2 ambient combinations shows a decreased sheet resistance (5.06 ohm/□) and increased optical transmittance (69%) than other samples. The refractive index and packing density of the films were projected using optical transmission spectrum. From the observed results the Ar+O2+H2 ambient is a good choice to enhance the total optoelectronic properties of the ITO films

  12. Effect of ambient combinations of argon, oxygen, and hydrogen on the properties of DC magnetron sputtered indium tin oxide films

    SciTech Connect

    Marikkannan, M.; Subramanian, M.; Tanemura, M.; Mayandi, J. E-mail: jeyanthinath@yahoo.co.in; Vishnukanthan, V.; Pearce, J. M. E-mail: jeyanthinath@yahoo.co.in

    2015-01-15

    Sputtering has been well-developed industrially with singular ambient gases including neutral argon (Ar), oxygen (O{sub 2}), hydrogen (H{sub 2}) and nitrogen (N{sub 2}) to enhance the electrical and optical performances of indium tin oxide (ITO) films. Recent preliminary investigation into the use of combined ambient gases such as an Ar+O{sub 2}+H{sub 2} ambient mixture, which was suitable for producing high-quality (low sheet resistance and high optical transmittance) of ITO films. To build on this promising preliminary work and develop deeper insight into the effect of ambient atmospheres on ITO film growth, this study provides a more detailed investigation of the effects of ambient combinations of Ar, O{sub 2}, H{sub 2} on sputtered ITO films. Thin films of ITO were deposited on glass substrates by DC magnetron sputtering using three different ambient combinations: Ar, Ar+O{sub 2} and Ar+O{sub 2}+H{sub 2}. The structural, electrical and optical properties of the three ambient sputtered ITO films were systematically characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), Raman spectroscopy, four probe electrical conductivity and optical spectroscopy. The XRD and Raman studies confirmed the cubic indium oxide structure, which is polycrystalline at room temperature for all the samples. AFM shows the minimum surface roughness of 2.7 nm for Ar+O{sub 2}+H{sub 2} sputtered thin film material. The thickness of the films was determined by the cross sectional SEM analysis and its thickness was varied from 920 to 817 nm. The columnar growth of ITO films was also discussed here. The electrical and optical measurements of Ar+O{sub 2}+H{sub 2} ambient combinations shows a decreased sheet resistance (5.06 ohm/□) and increased optical transmittance (69%) than other samples. The refractive index and packing density of the films were projected using optical transmission spectrum. From the observed results the Ar+O{sub 2}+H

  13. Iron films deposited on porous alumina substrates

    NASA Astrophysics Data System (ADS)

    Yamada, Yasuhiro; Tanabe, Kenichi; Nishida, Naoki; Kobayashi, Yoshio

    2016-12-01

    Iron films were deposited on porous alumina substrates using an arc plasma gun. The pore sizes (120 - 250 nm) of the substrates were controlled by changing the temperature during the anodic oxidation of aluminum plates. Iron atoms penetrated into pores with diameters of less than 160 nm, and were stabilized by forming γ-Fe, whereas α-Fe was produced as a flat plane covering the pores. For porous alumina substrates with pore sizes larger than 200 nm, the deposited iron films contained many defects and the resulting α-Fe had smaller hyperfine magnetic fields. In addition, only a very small amount of γ-Fe was obtained. It was demonstrated that the composition and structure of an iron film can be affected by the surface morphology of the porous alumina substrate on which the film is grown.

  14. Ultrashort pulse laser deposition of thin films

    DOEpatents

    Perry, Michael D.; Banks, Paul S.; Stuart, Brent C.

    2002-01-01

    Short pulse PLD is a viable technique of producing high quality films with properties very close to that of crystalline diamond. The plasma generated using femtosecond lasers is composed of single atom ions with no clusters producing films with high Sp.sup.3 /Sp.sup.2 ratios. Using a high average power femtosecond laser system, the present invention dramatically increases deposition rates to up to 25 .mu.m/hr (which exceeds many CVD processes) while growing particulate-free films. In the present invention, deposition rates is a function of laser wavelength, laser fluence, laser spot size, and target/substrate separation. The relevant laser parameters are shown to ensure particulate-free growth, and characterizations of the films grown are made using several diagnostic techniques including electron energy loss spectroscopy (EELS) and Raman spectroscopy.

  15. Metalloorganic solution deposition of ferroelectric PZT films.

    PubMed

    Lipeles, R A; Coleman, D J; Leung, M S

    1991-01-01

    The metallo-organic solution deposition (MOSD or sol-gel) technique can be used for preparing lead zirconate titanate (PZT) ceramics with a wide range of compositions and crystal structures for electrooptical applications. Film morphology is affected by the stoichiometry of the film, hydrolysis and polymerization of the sol-gel solution, and thermal treatment of the deposited material. The lattice parameter decreases with the amount of titanium in the PZT, in agreement with ceramic data. A slight initial excess of lead in the coating solution is found to improve film morphology. Unlike traditional powder ceramic processing techniques, MOSD permits the growth of small uniform grains that are conducive to achieving consistent electronic and optical properties. Results show that the properties of films prepared by the MOSD process can be tailored to meet the needs of device applications.

  16. Cathodic deposition and characterization of tin oxide coatings on graphite for electrochemical supercapacitors

    NASA Astrophysics Data System (ADS)

    Wu, Mengqiang; Zhang, Liping; Wang, Dongmei; Xiao, Chao; Zhang, Shuren

    Amorphous tin oxide (SnO x) was cathodically deposited onto graphite electrode in a bath containing 0.1 M stannous chloride (SnCl 2), 0.5 M sodium nitrate (NaNO 3), and 0.4 M nitric acid (HNO 3) in an aqueous solution of 50% (v/v) ethanol. The SnO x coatings grown on graphite were characterized as typical capacitive behaviors by cyclic voltammetry (CV), chronopotentiometric (CP) in 0.5 M KCl. Specific capacitance (in milli-farad per square centimeter, C a) changes linearly with the deposition charge up to 4.5 C cm -2, and a maximum of as high as 355 mF cm -2 was obtained with the SnO x coating grown at around 5 C cm -2. For the SnO x coating deposited at 0.2 C cm -2, a maximum specific capacitance (in farad per gram, C m) of 298 and 125 F g -1 was achieved from CVs at a scan rate of 10, and 200 mV s -1, respectively. The value of C m significantly gets lower from 265 to around 95 F g -1 when the deposition charge increases from 0.2 to around 6.0 C cm -2. The long cycle-life and stability of the SnO x coatings on graphite via the presented cathodic deposition were also demonstrated.

  17. Stainless Steel Bipolar Plates Deposited with Multilayer Films for PEMFC Applications

    NASA Astrophysics Data System (ADS)

    Cho, Hyun; Yun, Young-Hoon

    2013-08-01

    A chromium nitride (CrN, Cr2N)/chromium (Cr)/indium-tin-oxide (ITO) system and a gold (Au)/titanium (Ti) system were separately deposited using a sputtering method and an E-beam method, respectively, onto stainless steel 316 and 304 plates. The XRD patterns of the deposited stainless steel plates showed the crystalline phase of typical indium-tin oxide and of metallic phases, such as chromium, gold, and the metal substrate, as well as those of external chromium nitride films. The nitride films were composed of two metal nitride phases that consisted of CrN and Cr2N compounds. The surface morphologies of the modified stainless steel bipolar plates were observed using atomic force microscopy and FE-SEM. The chromium nitride (CrN, Cr2N)/chromium (Cr)/indium-tin-oxide (ITO) multilayer that was formed on the stainless steel plates had a surface microstructural morphology that consisted of fine columnar grains 10 nm in diameter and 60 nm in length. The external gold films that were formed on the stainless steel plates had a grain microstructure approximately 100 nm in diameter. The grain size of the external surface of the stainless steel plates with the gold (Au)/titanium (Ti) system increased with increasing gold film thickness. The electrical resistances and water contact angles of the stainless steel bipolar plates that were covered with the multilayer films were examined as a function of the thickness of the ITO film or of the external gold film. In the corrosion test, ICP-MS results indicated that the gold (Au)/titanium (Ti) films showed relatively excellent chemical stability after exposure to H2SO4 solution with pH 3 at 80 °C.

  18. Formation of Tio2 Thin Film for Dye-Sensitized Solar Cell Application Using Electrophoresis Deposition

    NASA Astrophysics Data System (ADS)

    Nuryadi, Ratno; Akbar, Zico Alaia; Wargadipura, Agus Hadi S.; Gunlazuardi, Jarnuzi

    2010-10-01

    One of important processes on the fabrication of dye-sensitized solar cell (DSSC) is formation of TiO2 thin film. Thickness of TiO2 thin film is needed to be controlled in order to obtain optimum TiO2 thickness. Electrophoresis deposition is simple method for thin film deposition which enable us to control the thickness of thin film. In this work, the formation of TiO2 thin film on indium-doped tin oxide (ITO) glass using electrophoresis deposition is numerically and experimentally studied. We have succeeded to control the thickness of TiO2 thin film by changing of electrophoresis applied voltage and deposition time. In the experiment, TiO2 particles were suspended into isopropyl alcohol solution. Mg(NO3)2 was added to the solution in order to obtain the stable solution for electrophoresis. We found numerically that the Mg(NO3)2 in the range from 10-6 M to 10-4 M, is appropriate condition for the electrophoresis deposition. Using this method, we have fabricated DSSC device and study the effect of TiO2 thickness on DSSCs characteristic. Our results shows that the electrophoresis is not only essential for DSSC application but also for the other devices with a given thickness of TiO2 film.

  19. Laser deposition of bimetallic island films

    NASA Astrophysics Data System (ADS)

    Kucherik, A. O.; Arakelyan, S. M.; Kutrovskaya, S. V.; Osipov, A. V.; Istratov, A. V.; Vartanyan, T. A.; Itina, T. E.

    2016-08-01

    In this work the results of a bimetallic Au-Ag structure deposition from the colloidal system by nanosecond laser radiation are presented. The formation of the extended arrays of gold and silver nanoparticles with controlled morphology is examined. We report the results of formation bimetallic islands films with various electrical and optical properties. The changes in the optical properties of the obtained thin films are found to depend on their morphology.

  20. [Electron cyclotron resonance (ECR) plasma film deposition

    SciTech Connect

    1999-04-01

    During the third quarter of 1995, an electron cyclotron resonance (ECR) plasma film deposition facility was constructed at the University of New Mexico. This work was conducted in support of the Los Alamos/Tycom CRADA agreement to pursue methods of improving drill bit lifetime. Work in the fourth quarter will center on the coating of drill bits and the treating and testing of various test samples. New material systems as well as treatment techniques will be attempted during this period. The following is a brief description of the various subsystems of the film deposition facility. Particular emphasis is placed on the slotted waveguide system as requested.

  1. V2O5 thin film deposition for application in organic solar cells

    NASA Astrophysics Data System (ADS)

    Arbab, Elhadi A. A.; Mola, Genene Tessema

    2016-04-01

    Vanadium pentoxide V2O5 films were fabricated by way of electrochemical deposition technique for application as hole transport buffer layer in organic solar cell. A thin and uniform V2O5 films were successfully deposited on indium tin oxide-coated glass substrate. The characterization of surface morphology and optical properties of the deposition suggest that the films are suitable for photovoltaic application. Organic solar cell fabricated using V2O5 as hole transport buffer layer showed better devices performance and environmental stability than those devices fabricated with PEDOT:PSS. In an ambient device preparation condition, the power conversion efficiency increases by nearly 80 % compared with PEDOT:PSS-based devices. The devices lifetime using V2O5 buffer layer has improved by a factor of 10 over those devices with PEDOT:PSS.

  2. Characterization of CuInTe2 thin films deposited by electrochemical technique

    NASA Astrophysics Data System (ADS)

    Patil, Neelima A.; Lakhe, Manorama; Chaure, N. B.

    2012-06-01

    Copper Indium ditelluride (CuInTe2) thin films were deposited onto fluorine doped tin oxide (FTO) coated glass substrates by electrodeposition technique. Cyclic voltammetry analysis was used to optimize suitable deposition parameters. Micro structural properties were examined by means of scanning electron microscopy (SEM), X-ray diffraction (XRD) and energy dispersive X-ray analysis (EDAX) for as-deposited and annealed films at 400 °C. After annealing the prominent (112), (220/204), (312/116) peaks of CuInTe2 (CIT) were observed indicate tetragonal structure which is most common structure of I-III-VI2 semiconductors, suitable for high efficiency photovoltaic devices. The band gap of the CIT film was determined around 1.01 eV. Elemental composition analysis was performed using energy dispersive X-ray analysis (EDAX).

  3. Parametrization of optical properties of indium-tin-oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity

    NASA Astrophysics Data System (ADS)

    Losurdo, M.; Giangregorio, M.; Capezzuto, P.; Bruno, G.; de Rosa, R.; Roca, F.; Summonte, C.; Plá, J.; Rizzoli, R.

    2002-01-01

    Indium-tin-oxide (ITO) films deposited by sputtering and e-gun evaporation on both transparent (Corning glass) and opaque (c-Si, c-Si/SiO2) substrates and in c-Si/a-Si:H/ITO heterostructures have been analyzed by spectroscopic ellipsometry (SE) in the range 1.5-5.0 eV. Taking the SE advantage of being applicable to absorbent substrate, ellipsometry is used to determine the spectra of the refractive index and extinction coefficient of the ITO films. The effect of the substrate surface on the ITO optical properties is focused and discussed. To this aim, a parametrized equation combining the Drude model, which considers the free-carrier response at the infrared end, and a double Lorentzian oscillator, which takes into account the interband transition contribution at the UV end, is used to model the ITO optical properties in the useful UV-visible range, whatever the substrate and deposition technique. Ellipsometric analysis is corroborated by sheet resistance measurements.

  4. Physical Vapor Deposition of Thin Films

    NASA Astrophysics Data System (ADS)

    Mahan, John E.

    2000-01-01

    A unified treatment of the theories, data, and technologies underlying physical vapor deposition methods With electronic, optical, and magnetic coating technologies increasingly dominating manufacturing in the high-tech industries, there is a growing need for expertise in physical vapor deposition of thin films. This important new work provides researchers and engineers in this field with the information they need to tackle thin film processes in the real world. Presenting a cohesive, thoroughly developed treatment of both fundamental and applied topics, Physical Vapor Deposition of Thin Films incorporates many critical results from across the literature as it imparts a working knowledge of a variety of present-day techniques. Numerous worked examples, extensive references, and more than 100 illustrations and photographs accompany coverage of: * Thermal evaporation, sputtering, and pulsed laser deposition techniques * Key theories and phenomena, including the kinetic theory of gases, adsorption and condensation, high-vacuum pumping dynamics, and sputtering discharges * Trends in sputter yield data and a new simplified collisional model of sputter yield for pure element targets * Quantitative models for film deposition rate, thickness profiles, and thermalization of the sputtered beam

  5. Indium-tin oxide films obtained by DC magnetron sputtering for improved Si heterojunction solar cell applications

    NASA Astrophysics Data System (ADS)

    Gu, Jin-Hua; Si, Jia-Le; Wang, Jiu-Xiu; Feng, Ya-Yang; Gao, Xiao-Yong; Lu, Jing-Xiao

    2015-11-01

    The indium-tin oxide (ITO) film as the antireflection layer and front electrodes is of key importance to obtaining high efficiency Si heterojunction (HJ) solar cells. To obtain high transmittance and low resistivity ITO films by direct-current (DC) magnetron sputtering, we studied the impacts of the ITO film deposition conditions, such as the oxygen flow rate, pressure, and sputter power, on the electrical and optical properties of the ITO films. ITO films of resistivity of 4×10-4 Ω·m and average transmittance of 89% in the wavelength range of 380-780 nm were obtained under the optimized conditions: oxygen flow rate of 0.1 sccm, pressure of 0.8 Pa, and sputtering power of 110 W. These ITO films were used to fabricate the single-side HJ solar cell without an intrinsic a-Si:H layer. However, the best HJ solar cell was fabricated with a lower sputtering power of 95 W, which had an efficiency of 11.47%, an open circuit voltage (Voc) of 0.626 V, a filling factor (FF) of 0.50, and a short circuit current density (Jsc) of 36.4 mA/cm2. The decrease in the performance of the solar cell fabricated with high sputtering power of 110 W is attributed to the ion bombardment to the emitter. The Voc was improved to 0.673 V when a 5 nm thick intrinsic a-Si:H layer was inserted between the (p) a-Si:H and (n) c-Si layer. The higher Voc of 0.673 V for the single-side HJ solar cell implies the excellent c-Si surface passivation by a-Si:H. Project supported by the National High Technology Research and Development Program of China (Grant No. 2011AA050501).

  6. Vapor deposition routes to conformal polymer thin films

    PubMed Central

    Moni, Priya; Al-Obeidi, Ahmed

    2017-01-01

    Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polymer thin films. PMID:28487816

  7. Synthesis And Characterization of Copper Zinc Tin Sulfide Nanoparticles And Thin Films

    NASA Astrophysics Data System (ADS)

    Khare, Ankur

    Copper zinc tin sulfide (Cu2ZnSnS4, or CZTS) is emerging as an alternative material to the present thin film solar cell technologies such as Cu(In,Ga)Se2 and CdTe. All the elements in CZTS are abundant, environmentally benign, and inexpensive. In addition, CZTS has a band gap of ˜1.5 eV, the ideal value for converting the maximum amount of energy from the solar spectrum into electricity. CZTS has a high absorption coefficient (>104 cm-1 in the visible region of the electromagnetic spectrum) and only a few micron thick layer of CZTS can absorb all the photons with energies above its band gap. CZT(S,Se) solar cells have already reached power conversion efficiencies >10%. One of the ways to improve upon the CZTS power conversion efficiency is by using CZTS quantum dots as the photoactive material, which can potentially achieve efficiencies greater than the present thin film technologies at a fraction of the cost. However, two requirements for quantum-dot solar cells have yet to be demonstrated. First, no report has shown quantum confinement in CZTS nanocrystals. Second, the syntheses to date have not provided a range of nanocrystal sizes, which is necessary not only for fundamental studies but also for multijunction photovoltaic architectures. We resolved these two issues by demonstrating a simple synthesis of CZTS, Cu2SnS3, and alloyed (Cu2SnS3) x(ZnS)y nanocrystals with diameters ranging from 2 to 7 nm from diethyldithiocarbamate complexes. As-synthesized nanocrystals were characterized using high resolution transmission electron microscopy, X-ray diffraction, Raman spectroscopy, and energy dispersive spectroscopy to confirm their phase purity. Nanocrystals of diameter less than 5 nm were found to exhibit a shift in their optical absorption spectra towards higher energy consistent with quantum confinement and previous theoretical predictions. Thin films from CZTS nanocrystals deposited on Mo-coated quartz substrates using drop casting were found to be continuous

  8. Photocatalysis of zinc oxide nanotip array/titanium oxide film heterojunction prepared by aqueous solution deposition

    NASA Astrophysics Data System (ADS)

    Lee, Ming-Kwei; Lee, Bo-Wei; Kao, Chen-Yu

    2017-05-01

    A TiO2 film was prepared on indium tin oxide (ITO)/glass by aqueous solution deposition (ASD) with precursors of ammonium hexafluoro-titanate and boric acid at 40 °C. The photocatalysis of annealed TiO2 film increases with increasing growth time and decreases with increasing growth times longer than 60 min. A ZnO nanotip array was prepared on ZnO seed layer/TiO2 film/glass by aqueous solution deposition with precursors of zinc nitrate and ammonium hydroxide at 70 °C. The photocatalysis of ASD-ZnO/ASD-TiO2 film/ITO glass can be better than that of P25.

  9. Annealing effects on electrical properties of pure and tin-doped indium oxide thin films.

    PubMed

    Kato, Kazuhiro; Omoto, Hideo; Yonekura, Masaaki

    2012-12-01

    The annealing effects on the properties of ITO and pure In2O3 thin films have been investigated. The thin films were deposited with various O2 flow ratios to total gas flow by pulsed dc magnetron sputtering. The post-deposition annealing of the thin films was carried out for 30 minutes at various temperatures ranging up to 500 degrees C in air. It was found through the comparison of the carrier density of ITO and In2O3 thin films that the carrier electrons of the ITO thin films came from both of the dopant Sn and oxygen vacancies under the annealing less than 400 degrees C. Therefore, the ITO thin films deposited with lower O2 flow ratio exhibited higher carrier density due to many oxygen vacancies; in consequence, they exhibited lower resistivity at the annealing up to 400 degrees C. On the other hand, the carrier density of ITO thin films was almost identical regardless of O2 flow ratio when they were annealed at 500 degrees C. This fact indicates that most carrier electrons of the ITO thin films were brought by the dopant Sn at the annealing temperature of 500 degrees C. However, the ITO thin films deposited with lower O2 flow ratio exhibited higher Hall mobility; as a result, they showed lower resistivity at the annealing of 500 degrees C. Atomic force microscope, X-ray diffraction and X-ray reflectivity measurements revealed that the ITO thin films deposited with lowe O2 flow ratio exhibited dense structure even after they were annealed at 500 degrees C. Hence, the carrier electrons of the dense ITO thin films deposited with low O2 flow ratio can conduct better, as a result, the ITO thin films exhibited high Hall mobility and low resistivity.

  10. Self-consistent modelling of X-ray photoelectron spectra from air-exposed polycrystalline TiN thin films

    NASA Astrophysics Data System (ADS)

    Greczynski, G.; Hultman, L.

    2016-11-01

    We present first self-consistent modelling of x-ray photoelectron spectroscopy (XPS) Ti 2p, N 1s, O 1s, and C 1s core level spectra with a cross-peak quantitative agreement for a series of TiN thin films grown by dc magnetron sputtering and oxidized to different extent by varying the venting temperature Tv of the vacuum chamber before removing the deposited samples. So-obtained film series constitute a model case for XPS application studies, where certain degree of atmosphere exposure during sample transfer to the XPS instrument is unavoidable. The challenge is to extract information about surface chemistry without invoking destructive pre-cleaning with noble gas ions. All TiN surfaces are thus analyzed in the as-received state by XPS using monochromatic Al Kα radiation (hν = 1486.6 eV). Details of line shapes and relative peak areas obtained from deconvolution of the reference Ti 2p and N 1 s spectra representative of a native TiN surface serve as an input to model complex core level signals from air-exposed surfaces, where contributions from oxides and oxynitrides make the task very challenging considering the influence of the whole deposition process at hand. The essential part of the presented approach is that the deconvolution process is not only guided by the comparison to the reference binding energy values that often show large spread, but in order to increase reliability of the extracted chemical information the requirement for both qualitative and quantitative self-consistency between component peaks belonging to the same chemical species is imposed across all core-level spectra (including often neglected O 1s and C 1s signals). The relative ratios between contributions from different chemical species vary as a function of Tv presenting a self-consistency check for our model. We propose that the cross-peak self-consistency should be a prerequisite for reliable XPS peak modelling as it enhances credibility of obtained chemical information, while relying

  11. The influence of Sb doping on the structural, optical and electrical properties of tin oxide thin film

    NASA Astrophysics Data System (ADS)

    Yusnidar, M. N.; Fauzia, V.; Handoko, D.; Hanum, L.

    2017-04-01

    Antimony-doped Tin Oxide (Sb:SnO2), shortened as ATO, has become more popular due to their great technological importance. ATO was considered as important transparent conducting material for optoelectronic devices and sensors application because of its unique and special characteristic such as high transparency in visible region, and high electrons concentration and mobility. In this study, the Sb:SnO2 thin film have been fabricated with low cost and simple ultrasonic spray pyrolysis method. SnO2 thin film was deposited with three different Sb concentrations namely 1, 2, and 3 wt%. The structural, morphological, optical and electrical properties of this film have been analyzed by using X-ray diffraction, scanning electron microscopy, UV-VIS and four point probe instruments. Based on the optical and electrical properties characterization, the best concentration of Sb doping was 2wt% because its transmittance was above 80% at all wavelength range measured, and the electrical resistivity was quite low, at 0.663 × 10-3 Ω cm.

  12. Inkjet-printing of antimony-doped tin oxide (ATO) films for transparent conducting electrodes.

    PubMed

    Lim, Jongwoo; Jeong, Bong Yong; Yoon, Ho Gyu; Lee, Sung-Nam; Kim, Jihoon

    2012-02-01

    Antimony-doped Tin oxide (ATO) films have been prepared by inkjet-printing method using ATO nanoparticle inks. The electrical and optical properties of the ATO films were investigated in order to understand the effects of rapid thermal annealing (RTA) temperatures. The decrease in the sheet resistance and resistivity of the inkjet-printed ATO films was observed as the annealing temperature increased. The film annealed at 700 degrees C showed the sheet resistance of 1.7 x 10(3) Omega/sq with the film thickness of 350 nm. The optical transmittance of the films remained constant regardless of their annealing temperatures. In order to further reduce the sheet resistance of the films as well as the annealing temperature, Ag-grid was printed in between two layers of inkjet-printed ATO. With 1.5 mm Ag line spacing, the Ag-grid embedded ATO film showed the sheet resistance of 25.6 Omega/sq after RTA at 300 degrees C.

  13. Ultrasound-Assisted Deposition Of Dielectric Films

    NASA Astrophysics Data System (ADS)

    Hwangbo, C. K.; Jacobson, M. R.; Macleod, H. A.; Potoff, R. H.

    1986-12-01

    The effects of ultrasound-assisted deposition (UAD) of ZrOx , Ta0x , and MgFx films on their optical properties have been investigated. The direction of vibration is transverse to the direction of growing films on substrates that are glued to tubular piezoelectric transducers driven by a power amplifier. Results indicate that ultrasonic powers above 20 W/cm2 are required to induce detectable changes in UV absorption and vacuum-to-air shifts of spectral profiles. UAD is likely to induce oxygen and fluoride deficiencies in oxide and fluoride films and increase the packing density of films. No significant changes between UAD and conventional films were observed in x-ray diffraction analysis, humidity testing, and Nomarski microscopy.

  14. Photobiomolecular deposition of metallic particles and films

    DOEpatents

    Hu, Zhong-Cheng

    2005-02-08

    The method of the invention is based on the unique electron-carrying function of a photocatalytic unit such as the photosynthesis system I (PSI) reaction center of the protein-chlorophyll complex isolated from chloroplasts. The method employs a photo-biomolecular metal deposition technique for precisely controlled nucleation and growth of metallic clusters/particles, e.g., platinum, palladium, and their alloys, etc., as well as for thin-film formation above the surface of a solid substrate. The photochemically mediated technique offers numerous advantages over traditional deposition methods including quantitative atom deposition control, high energy efficiency, and mild operating condition requirements.

  15. F2-laser patterning of indium tin oxide (ITO) thin film on glass substrate

    NASA Astrophysics Data System (ADS)

    Xu, M. Y.; Li, J.; Lilge, L. D.; Herman, P. R.

    2006-10-01

    This paper reports the controlled micromachining of 100 nm thick indium tin oxide (ITO) thin films on glass substrates with a vacuum-ultraviolet 157 nm F2 laser. Partial to complete film removal was observed over a wide fluence window from 0.49 J/cm2 to an optimized single pulse fluence of 4.5 J/cm2 for complete film removal. Optical microscopy, atomic force microscopy, and energy dispersive X-ray analysis show little substrate or collateral damage by the laser pulse which conserved the stoichiometry, optical transparency and electrical conductivity of ITO coating adjacent to the trenches. At higher fluence, a parallel micron sized channel can be etched in the glass substrate. The high photon energy and top-hat beam homogenized optical system of the F2 laser opens new means for direct structuring of electrodes and microchannels in biological microfluidic systems or in optoelectronics.

  16. Synthesis and characterization of one-dimensional nanostructured fluorine-doped tin dioxide thin films

    NASA Astrophysics Data System (ADS)

    Murakami, Kenji; Bandara, Ajith; Okuya, Masayuki; Shimomura, Masaru; Rajapakse, R. M. G.

    2016-09-01

    This paper describes preparation and characterization of the optically-transparent and electrically conducting thin films of fluoride-doped tin dioxide (FTO) one-dimensional nanostructures and features of the purpose-built, novel and advanced version of spray pyrolysis technique, known as Rotational, Pulsed and Atomized Spray Pyrolysis. This technique allows perfect and simple control of morphology of the nanostructures of FTO layer by adjusting the spray conditions. Effect of the different additives on crystal morphology and texture of the 1-dimensional (1-D) nanostructured FTO thin films is studied. Vertically aligned and well separated nanotubes are easily fabricated using propanone and ethanol as additives. We suggest that propanone additive plays a role to form vertically aligned nanotubes with (101) preferential orientation while (110) face is the predominant plane of well separated nanotubes with ethanol additive. The conductivity of the 1-D nanostructured thin films are also enhanced using the commercial FTO glasses as a substrate.

  17. Post-annealing-free, room temperature processed nanocrystalline indium tin oxide thin films for plastic electronics

    NASA Astrophysics Data System (ADS)

    Nyoung Jang, Jin; Jong Lee, You; Jang, YunSung; Yun, JangWon; Yi, Seungjun; Hong, MunPyo

    2016-06-01

    In this study, we confirm that bombardment by high energy negative oxygen ions (NOIs) is the key origin of electro-optical property degradations in indium tin oxide (ITO) thin films formed by conventional plasma sputtering processes. To minimize the bombardment effect of NOIs, which are generated on the surface of the ITO targets and accelerated by the cathode sheath potential on the magnetron sputter gun (MSG), we introduce a magnetic field shielded sputtering (MFSS) system composed of a permanent magnetic array between the MSG and the substrate holder to block the arrival of energetic NOIs. The MFSS processed ITO thin films reveal a novel nanocrystal imbedded polymorphous structure, and present not only superior electro-optical characteristics but also higher gas diffusion barrier properties. To the best of our knowledge, no gas diffusion barrier composed of a single inorganic thin film formed by conventional plasma sputtering processes achieves such a low moisture permeability.

  18. Microscopically crumpled indium-tin-oxide thin films as compliant electrodes with tunable transmittance

    SciTech Connect

    Ong, Hui-Yng; Shrestha, Milan; Lau, Gih-Keong

    2015-09-28

    Indium-tin-oxide (ITO) thin films are perceived to be stiff and brittle. This letter reports that crumpled ITO thin films on adhesive poly-acrylate dielectric elastomer can make compliant electrodes, sustaining compression of up to 25% × 25% equi-biaxial strain and unfolding. Its optical transmittance reduces with crumpling, but restored with unfolding. A dielectric elastomer actuator (DEA) using the 14.2% × 14.2% initially crumpled ITO thin-film electrodes is electrically activated to produce a 37% areal strain. Such electric unfolding turns the translucent DEA to be transparent, with transmittance increased from 39.14% to 52.08%. This transmittance tunability promises to make a low-cost smart privacy window.

  19. Hybrid composite thin films composed of tin oxide nanoparticles and cellulose

    NASA Astrophysics Data System (ADS)

    Mahadeva, Suresha K.; Nayak, Jyoti; Kim, Jaehwan

    2013-07-01

    This paper reports the preparation and characterization of hybrid thin films consisting of tin oxide (SnO2) nanoparticles and cellulose. SnO2 nanoparticle loaded cellulose hybrid thin films were fabricated by a solution blending technique, using sodium dodecyl sulfate as a dispersion agent. Scanning and transmission electron microscopy studies revealed uniform dispersion of the SnO2 nanoparticles in the cellulose matrix. Reduction in the crystalline melting transition temperature and tensile properties of cellulose was observed due to the SnO2 nanoparticle loading. Potential application of these hybrid thin films as low cost, flexible and biodegradable humidity sensors is examined in terms of the change in electrical resistivity of the material exposed to a wide range of humidity as well as its response-recovery behavior.

  20. Microscopically crumpled indium-tin-oxide thin films as compliant electrodes with tunable transmittance

    NASA Astrophysics Data System (ADS)

    Ong, Hui-Yng; Shrestha, Milan; Lau, Gih-Keong

    2015-09-01

    Indium-tin-oxide (ITO) thin films are perceived to be stiff and brittle. This letter reports that crumpled ITO thin films on adhesive poly-acrylate dielectric elastomer can make compliant electrodes, sustaining compression of up to 25% × 25% equi-biaxial strain and unfolding. Its optical transmittance reduces with crumpling, but restored with unfolding. A dielectric elastomer actuator (DEA) using the 14.2% × 14.2% initially crumpled ITO thin-film electrodes is electrically activated to produce a 37% areal strain. Such electric unfolding turns the translucent DEA to be transparent, with transmittance increased from 39.14% to 52.08%. This transmittance tunability promises to make a low-cost smart privacy window.

  1. Preparation and characterization of indium tin oxide films by sol-gel method

    NASA Astrophysics Data System (ADS)

    Ciuciumis, Alina; Cernica, Ileana

    2007-05-01

    Sol-gel technology is a relatively simple and cheap process to deposit oxides under thin film form out of a sol. The experiments were developed in order to obtain nanomaterials by sol-gel method; nanomaterials that mixed with resin and additives can be deposited in thin and uniform films by spraying on different lignocellulosic composite surfaces. This method assures a functional finishing of the nanomaterials. These films are transparent and the surfaces are flat with no cracks. The influence of substrate type, morphology of the films and of the substrates before and after deposition was studied by means of optical microscopy, scanning electron microscopy (SEM) and atomic force microscopy (AFM). The sol-gel deposit on the lignocellulosic composite substrates lowered the sorption rates of water and water vapours.

  2. The Role of Silver in Mitigation of Whisker Formation on Thin Tin Films

    NASA Astrophysics Data System (ADS)

    Stein, J.; Rehm, S.; Welzel, U.; Huegel, W.; Mittemeijer, E. J.

    2014-11-01

    The mitigating effect of alloying Sn thin films with Ag on the formation of Sn whiskers was investigated by time-resolved investigations employing x-ray diffraction for phase and stress analyses and focused ion beam microscopy for morphological characterization of the surfaces and cross-sections of the specimens. The investigated Sn-6 wt.%Ag thin films were prepared by galvanic co-deposition. The results are compared with those obtained from investigation of pure Sn films and discussed with regard to current whisker-growth models. The simultaneous deposition of Sn and Ag leads to a fine-grained microstructure consisting of columnar and equiaxed grains, i.e. an imperfect columnar Sn film microstructure. Isolated Ag3Sn grains are present at the Sn grain boundaries in the as-deposited films. Pronounced grain growth was observed during aging at room temperature, which provides a global stress relaxation mechanism that prevents Sn whisker growth.

  3. The nucleation and growth of electrochemically deposited copper on PVD copper and TiN using alkaline baths

    NASA Astrophysics Data System (ADS)

    Graham, Lyndon Wallace

    2000-10-01

    The nucleation and growth of constant potential electrochemically deposited copper was investigated using ethylenediaminetetraacetic acid (EDTA) and NH3 copper complexed alkaline baths. The mechanisms of copper nucleation and growth were studied under four conditions: (1) on non-patterned PVD TiN, (2) on in-laid (Damascene) PVD TiN trenches, (3) on non-patterned PVD Cu, and (4) on in-laid (Damascene) PVD Cu trenches. The deposition mechanism for both the EDTA and the NH3 baths on both patterned and non-patterned PVD Cu was layer-by-layer. Growth of copper was conformal at lower potentials becoming sub-conformal at higher potentials, indicating mass-transfer restricted growth in the trenches. There were significant differences in the nucleation and growth mechanism for the different chemical systems on TiN. The NH3 based bath exhibited a high surface tension between the deposited copper and the TiN. This resulted in spherical growth morphology classified as the Volmer-Weber nucleation and growth mechanism. Surprisingly, fill was possible, but with sporadic pinhole voids. The adhesion of the deposited copper was poor, indicating that it is not suitable for direct deposition on TiN. However, when it is necessary to only fill trench PVD seed gaps with copper (as opposed to filling the entire trench), the NH3 bath may be suitable for this application. The EDTA based bath exhibited high adhesion at lower potentials and also filled the trenches with sporadic pinhole voids. Nucleation and growth was characterized by the Stranski-Krastanov mechanism in which copper is first deposited with two-dimensional morphology followed by three-dimensional growth in the over potential deposition (OPD) mode. This is a result of the adsorbed species reducing two-dimensionally on the TiN substrate and is probably the reason for the higher adhesion. This makes the EDTA based system more suitable for the purpose of enhancing a PVD Cu seed layer and possibly for direct deposition on a TiN

  4. Structure, stability and electrochromic properties of polyaniline film covalently bonded to indium tin oxide substrate

    NASA Astrophysics Data System (ADS)

    Zhang, Wenzhi; Ju, Wenxing; Wu, Xinming; Wang, Yan; Wang, Qiguan; Zhou, Hongwei; Wang, Sumin; Hu, Chenglong

    2016-03-01

    Indium tin oxide (ITO) substrate was modified with 4-aminobenzylphosphonic acid (ABPA), and then the polyaniline (PANI) film covalently bonded to ITO substrate was prepared by the chemical oxidation polymerization. X-ray photoelectron spectroscopy (XPS), attenuated total reflection infrared (ATR-IR) spectroscopy, and atomic force microscopy (AFM) measurements demonstrated that chemical binding was formed between PANI and ABPA-modified ITO surface, and the maximum thickness of PANI layer is about 30 nm. The adhesive strength of PANI film on ITO substrate was tested by sonication. It was found that the film formed on the modified ITO exhibited a much better stability than that on bare one. Cyclic voltammetry (CV) and UV-vis spectroscopy measurements indicated that the oxidative potentials of PANI film on ABPA-modified ITO substrate were decreased and the film exhibited high electrochemical activities. Moreover, the optical contrast increased from 0.58 for PANI film (without ultrasound) to 1.06 for PANI film (after ultrasound for 60 min), which had an over 83% enhancement. The coloration time was 20.8 s, while the bleaching time was 19.5 s. The increase of electrochromic switching time was due to the lower ion diffusion coefficient of the large cation of (C4H9)4N+ under the positive and negative potentials as comparison with the small Li+ ion.

  5. Nanostructured nickel oxide films prepared by chemical vapor deposition and their electrochromic properties.

    PubMed

    Vargas Garcia, J R; Lazcano Ugalde, E M; Hernandez Santiago, F; Hallen Lopez, J M

    2008-05-01

    The influence of the deposition conditions on the structural features and electrochromic properties of nickel oxide (NiO) films prepared by chemical vapor deposition has been investigated. NiO films have been prepared on fluorine doped tin oxide (FTO) coated glass substrates from nickel-acetylacetonate precursor and their electrochromic properties have been studied by cyclic voltammetry in a 0.1 M KOH solution at room temperature. Films exhibiting only the NiO phase were obtained at deposition temperatures higher than 450 degrees C in a wide range of reactor pressures (0.13 to 66.6 kPa). Particularly, NiO films prepared at 500-550 degrees C from 0.13 to 53.3 kPa are transparent in nature and exhibit a crystallite size varying from 10 to 60 nm. An appreciable anodic electrochromic change from transparent to black coloured resulted from a very porous surface morphology and film thickness of about 3.5 microm. The electrochromic change was maintained over 3000 switching cycles. Nanostructured 3.5 microm-thick NiO films showed a maximum difference in optical transmittance of about 40% in the near-infrared region. These results make the nanostructured NiO films comparables with those prepared by other deposition techniques.

  6. Organosilane-functionalization of nanostructured indium tin oxide films.

    PubMed

    Pruna, R; Palacio, F; Martínez, M; Blázquez, O; Hernández, S; Garrido, B; López, M

    2016-12-06

    Fabrication and organosilane-functionalization and characterization of nanostructured ITO electrodes are reported. Nanostructured ITO electrodes were obtained by electron beam evaporation, and a subsequent annealing treatment was selectively performed to modify their crystalline state. An increase in geometrical surface area in comparison with thin-film electrodes area was observed by atomic force microscopy, implying higher electroactive surface area for nanostructured ITO electrodes and thus higher detection levels. To investigate the increase in detectability, chemical organosilane-functionalization of nanostructured ITO electrodes was performed. The formation of 3-glycidoxypropyltrimethoxysilane (GOPTS) layers was detected by X-ray photoelectron spectroscopy. As an indirect method to confirm the presence of organosilane molecules on the ITO substrates, cyclic voltammetry and electrochemical impedance spectroscopy (EIS) were also carried out. Cyclic voltammograms of functionalized ITO electrodes presented lower reduction-oxidation peak currents compared with non-functionalized ITO electrodes. These results demonstrate the presence of the epoxysilane coating on the ITO surface. EIS showed that organosilane-functionalized electrodes present higher polarization resistance, acting as an electronic barrier for the electron transfer between the conductive solution and the ITO electrode. The results of these electrochemical measurements, together with the significant difference in the X-ray spectra between bare ITO and organosilane-functionalized ITO substrates, may point to a new exploitable oxide-based nanostructured material for biosensing applications. As a first step towards sensing, rapid functionalization of such substrates and their application to electrochemical analysis is tested in this work. Interestingly, oxide-based materials are highly integrable with the silicon chip technology, which would permit the easy adaptation of such sensors into lab

  7. Electrochemical impedance analysis of spray deposited CZTS thin film: Effect of Se introduction

    NASA Astrophysics Data System (ADS)

    Patil, Swati J.; Lokhande, Vaibhav C.; Lee, Dong-Weon; Lokhande, Chandrakant D.

    2016-08-01

    The present work deals with electrochemical impedance analysis of spray deposited Cu2ZnSnS4 (CZTS) thin films grown on fluorine doped tin oxide (FTO) substrates and effect of post Se introduction. The CZTS thin films are characterized using X-ray diffraction (XRD), X-Ray photo spectroscopy (XPS), field emission scanning electron microscopy (FE-SEM) and UV-Vis spectroscopy techniques. The electrochemical measurements are carried out using impedance analysis spectroscopy. The strong peak in XRD pattern along (112) plane confirms the Kestrite crystal structure of CZTS film. The FE-SEM analysis reveals that nanoflakes contain crack-free surface microstructure changes with post Se introucation. The optical study reveals that absorption increases with Se dipping time and observed lower band gap of 1.31 eV. Introduction of Se in CZTS film results an improvement in the grain size and surface morphology which leads to increased electrical conductivity of CZTS film.

  8. Effect of polyvinyl alcohol on electrochemically deposited ZnO thin films for DSSC applications

    NASA Astrophysics Data System (ADS)

    Marimuthu, T.; Anandhan, N.

    2017-05-01

    Nanostructures of zinc oxide (ZnO) thin film are electrochemically deposited in the absence and presence of polyvinyl alcohol (PVA) on fluorine doped tin oxide (FTO) substrate. X-ray diffraction (XRD) patterns and Raman spectroscopy confirmed the formation of hexagonal structure of ZnO. The film prepared in the presence of PVA showed a better crystallinity and its crystalline growth along the (002) plane orientation. Field emission scanning electron microscope (FE-SEM) images display nanowire arrays (NWAs) and sponge like morphology for films prepared in the absence and presence of PVA, respectively. Photoluminescence (PL) spectra depict the film prepared in the presence PVA having less atomic defects with good crystal quality compared with other film. Dye sensitized solar cell (DSSC) is constructed using low cost eosin yellow dye and current-voltage (J-V) curve is recorded for optimized sponge like morphology based solar cell.

  9. Structure Orientation in Phthalocyanine Film Growth by Vapor Deposition in Electrical Fields

    NASA Technical Reports Server (NTRS)

    Banks, C. E.; Zhu, S.; Frazier, D. O.; Penn, B. G.; Abdeldayem, H. A.; Sharma, A.; Rose, M. Franklin (Technical Monitor)

    2001-01-01

    Films of phthalocyanines were grown by vapor deposition in an electric field on to quartz substrates coated with a very thin layer of gold or indium tin oxide and compared to films grown in the absence of an electric field. A comparison of morphology, nonlinear optical properties, and crystal structure was also made. The films were characterized using scanning electron microscopy, x-ray diffraction, and FTIR. Films grown in the absence of an electric field had a fiber like morphology and those grown in electric fields having a maximum strength of 4000 V/cm had a dense-columnar structure. The crystal structure of films grown in an electric field was different than those grown in the absence of a field.

  10. Structure Orientation in Phthalocyanine Film Growth by Vapor Deposition in Electrical Fields

    NASA Technical Reports Server (NTRS)

    Banks, C. E.; Zhu, S.; Frazier, D. O.; Penn, B. G.; Abdeldayem, H. A.; Sharma, A.; Rose, M. Franklin (Technical Monitor)

    2001-01-01

    Films of phthalocyanines were grown by vapor deposition in an electric field on to quartz substrates coated with a very thin layer of gold or indium tin oxide and compared to films grown in the absence of an electric field. A comparison of morphology, nonlinear optical properties, and crystal structure was also made. The films were characterized using scanning electron microscopy, x-ray diffraction, and FTIR. Films grown in the absence of an electric field had a fiber like morphology and those grown in electric fields having a maximum strength of 4000 V/cm had a dense-columnar structure. The crystal structure of films grown in an electric field was different than those grown in the absence of a field.

  11. (Chemically vapor deposited diamond films)

    SciTech Connect

    Clausing, R.E.; Heatherly, L. Jr.

    1990-09-22

    The NATO-ASI on Diamond and Diamond-Like Films and Coatings'' was an opportunity for us to learn the latest research results from ongoing programs in the leading laboratories of the world and relate them to our work. Specific examples are given in the comprehensive report which follows. The meeting format provided an ideal environment to meet and interact with our international counterparts. It is clear that our studies are well regarded, and that we have established an excellent reputation in a short time. New opportunities for collaboration were identified. A panel discussion at the end of the meeting addressed the needs and opportunities in the synthesis of CVD diamond. The key scientific needs are those related to modeling the nucleation and growth processes and to elucidation of the critical roles of atomic hydrogen and the mechanisms of carbon addition to the growing surfaces. The development and more extensive use of in situ diagnostics for both surface and gas phases are important to solving these issues. The more immediate practical questions concern the identification of the growth-rate-limiting steps, the relation of growth parameters to the resulting film structure, and the dependence of properties on structure.

  12. Controllable nitrogen doping in as deposited TiO{sub 2} film and its effect on post deposition annealing

    SciTech Connect

    Deng, Shaoren; Devloo-Casier, Kilian; Devulder, Wouter; Dendooven, Jolien; Deduytsche, Davy; Detavernier, Christophe; Lenaerts, Silvia; Martens, Johan A.; Van den Berghe, Sven

    2014-01-15

    In order to narrow the band gap of TiO{sub 2}, nitrogen doping by combining thermal atomic layer deposition (TALD) of TiO{sub 2} and plasma enhanced atomic layer deposition (PEALD) of TiN has been implemented. By altering the ratio between TALD TiO{sub 2} and PEALD TiN, the as synthesized TiO{sub x}N{sub y} films showed different band gaps (from 1.91 eV to 3.14 eV). In situ x-ray diffraction characterization showed that the crystallization behavior of these films changed after nitrogen doping. After annealing in helium, nitrogen doped TiO{sub 2} films crystallized into rutile phase while for the samples annealed in air a preferential growth of the anatase TiO{sub 2} along (001) orientation was observed. Photocatalytic tests of the degradation of stearic acid were done to evaluate the effect of N doping on the photocatalytic activity.

  13. Ohmic contact formation on n-type Ge by direct deposition of TiN

    SciTech Connect

    Iyota, Masatoshi; Yamamoto, Keisuke; Wang, Dong; Yang, Haigui; Nakashima, Hiroshi

    2011-05-09

    We succeeded in Ohmic contact formation on an n-Ge substrate by direct sputter deposition from a TiN target and subsequent postmetallization annealing (PMA) at 350 deg. C. The Schottky barrier heights of the TiN/n-Ge and TiN/p-Ge contacts were 0.18 eV and 0.50 eV, respectively, and were maintained up to a PMA temperature of 550 deg. C. These electrical characteristics are likely to be associated with an approximately 1-nm-thick interlayer formed at a TiN/Ge interface, which leads to the alleviation of the Fermi level pinning. We demonstrated the validity of the TiN/n-Ge contact using an n{sup +}/p junction, which showed an excellent ideal factor of n=1.01.

  14. Purely electronic mechanism of electrolyte gating of indium tin oxide thin films.

    PubMed

    Leng, X; Bollinger, A T; Božović, I

    2016-08-10

    Epitaxial indium tin oxide films have been grown on both LaAlO3 and yttria-stabilized zirconia substrates using RF magnetron sputtering. Electrolyte gating causes a large change in the film resistance that occurs immediately after the gate voltage is applied, and shows no hysteresis during the charging/discharging processes. When two devices are patterned next to one another and the first one gated through an electrolyte, the second one shows no changes in conductance, in contrast to what happens in materials (like tungsten oxide) susceptible to ionic electromigration and intercalation. These findings indicate that electrolyte gating in indium tin oxide triggers a pure electronic process (electron depletion or accumulation, depending on the polarity of the gate voltage), with no electrochemical reactions involved. Electron accumulation occurs in a very thin layer near the film surface, which becomes highly conductive. These results contribute to our understanding of the electrolyte gating mechanism in complex oxides and may be relevant for applications of electric double layer transistor devices.

  15. Purely electronic mechanism of electrolyte gating of indium tin oxide thin films

    SciTech Connect

    Leng, X.; Bozovic, I.; Bollinger, A. T.

    2016-08-10

    Epitaxial indium tin oxide films have been grown on both LaAlO3 and yttria-stabilized zirconia substrates using RF magnetron sputtering. Electrolyte gating causes a large change in the film resistance that occurs immediately after the gate voltage is applied, and shows no hysteresis during the charging/discharging processes. When two devices are patterned next to one another and the first one gated through an electrolyte, the second one shows no changes in conductance, in contrast to what happens in materials (like tungsten oxide) susceptible to ionic electromigration and intercalation. These findings indicate that electrolyte gating in indium tin oxide triggers a pure electronic process (electron depletion or accumulation, depending on the polarity of the gate voltage), with no electrochemical reactions involved. Electron accumulation occurs in a very thin layer near the film surface, which becomes highly conductive. These results contribute to our understanding of the electrolyte gating mechanism in complex oxides and may be relevant for applications of electric double layer transistor devices.

  16. Electrochemical formation of tin oxide-hydroxide composite films for the application to electrochromic devices

    NASA Astrophysics Data System (ADS)

    Nishiyama, Kentaro; Matsuo, Ryo; Sasano, Junji; Yokoyama, Seiji; Izaki, Masanobu

    2017-07-01

    Liquid-state ion-storage layers which are commonly used for electrochromic devices (ECDs) have the problem of liquid leakage caused from mechanical damage or time degradation of sealing materials. To overcome this drawback, we tried to form Sn(O,H)x films comprising mixtures of tin oxide (SnO2) and tin hydroxide (Sn(OH)4) by electrodeposition in order to apply them to the solid-state ion-storage layers of solid-state ECDs. The Sn(O,H)x films were formed by anodic potentiostatic electrodeposition at 0.2 V vs. Ag/AgCl using 0.01 mol/L SnSO4 aqueous solution. Characterization of the samples with X-ray diffraction, energy dispersive X-ray spectrometry, Fourier transform infrared spectroscopy revealed that they are composed of SnO2 and Sn(OH)4. Moreover, a coloring experiment of an ECD having a structure of FTO/ WO3(H2O)0.33/Sn(O,H)x/Cu was carried out under the application of a voltage, and it changed the color from pale yellow to blue in the coloring experiment. This result shows that the Sn(O,H)x films possesses the function as the solid-state ion-storage layers of solid-state ECDs.

  17. Large area Germanium Tin nanometer optical film coatings on highly flexible aluminum substrates

    PubMed Central

    Jin, Lichuan; Zhang, Dainan; Zhang, Huaiwu; Fang, Jue; Liao, Yulong; Zhou, Tingchuan; Liu, Cheng; Zhong, Zhiyong; Harris, Vincent G.

    2016-01-01

    Germanium Tin (GeSn) films have drawn great interest for their visible and near-infrared optoelectronics properties. Here, we demonstrate large area Germanium Tin nanometer thin films grown on highly flexible aluminum foil substrates using low-temperature molecular beam epitaxy (MBE). Ultra-thin (10–180 nm) GeSn film-coated aluminum foils display a wide color spectra with an absorption wavelength ranging from 400–1800 nm due to its strong optical interference effect. The light absorption ratio for nanometer GeSn/Al foil heterostructures can be enhanced up to 85%. Moreover, the structure exhibits excellent mechanical flexibility and can be cut or bent into many shapes, which facilitates a wide range of flexible photonics. Micro-Raman studies reveal a large tensile strain change with GeSn thickness, which arises from lattice deformations. In particular, nano-sized Sn-enriched GeSn dots appeared in the GeSn coatings that had a thickness greater than 50 nm, which induced an additional light absorption depression around 13.89 μm wavelength. These findings are promising for practical flexible photovoltaic and photodetector applications ranging from the visible to near-infrared wavelengths. PMID:27667259

  18. Large area Germanium Tin nanometer optical film coatings on highly flexible aluminum substrates

    NASA Astrophysics Data System (ADS)

    Jin, Lichuan; Zhang, Dainan; Zhang, Huaiwu; Fang, Jue; Liao, Yulong; Zhou, Tingchuan; Liu, Cheng; Zhong, Zhiyong; Harris, Vincent G.

    2016-09-01

    Germanium Tin (GeSn) films have drawn great interest for their visible and near-infrared optoelectronics properties. Here, we demonstrate large area Germanium Tin nanometer thin films grown on highly flexible aluminum foil substrates using low-temperature molecular beam epitaxy (MBE). Ultra-thin (10–180 nm) GeSn film-coated aluminum foils display a wide color spectra with an absorption wavelength ranging from 400–1800 nm due to its strong optical interference effect. The light absorption ratio for nanometer GeSn/Al foil heterostructures can be enhanced up to 85%. Moreover, the structure exhibits excellent mechanical flexibility and can be cut or bent into many shapes, which facilitates a wide range of flexible photonics. Micro-Raman studies reveal a large tensile strain change with GeSn thickness, which arises from lattice deformations. In particular, nano-sized Sn-enriched GeSn dots appeared in the GeSn coatings that had a thickness greater than 50 nm, which induced an additional light absorption depression around 13.89 μm wavelength. These findings are promising for practical flexible photovoltaic and photodetector applications ranging from the visible to near-infrared wavelengths.

  19. Large area Germanium Tin nanometer optical film coatings on highly flexible aluminum substrates.

    PubMed

    Jin, Lichuan; Zhang, Dainan; Zhang, Huaiwu; Fang, Jue; Liao, Yulong; Zhou, Tingchuan; Liu, Cheng; Zhong, Zhiyong; Harris, Vincent G

    2016-09-26

    Germanium Tin (GeSn) films have drawn great interest for their visible and near-infrared optoelectronics properties. Here, we demonstrate large area Germanium Tin nanometer thin films grown on highly flexible aluminum foil substrates using low-temperature molecular beam epitaxy (MBE). Ultra-thin (10-180 nm) GeSn film-coated aluminum foils display a wide color spectra with an absorption wavelength ranging from 400-1800 nm due to its strong optical interference effect. The light absorption ratio for nanometer GeSn/Al foil heterostructures can be enhanced up to 85%. Moreover, the structure exhibits excellent mechanical flexibility and can be cut or bent into many shapes, which facilitates a wide range of flexible photonics. Micro-Raman studies reveal a large tensile strain change with GeSn thickness, which arises from lattice deformations. In particular, nano-sized Sn-enriched GeSn dots appeared in the GeSn coatings that had a thickness greater than 50 nm, which induced an additional light absorption depression around 13.89 μm wavelength. These findings are promising for practical flexible photovoltaic and photodetector applications ranging from the visible to near-infrared wavelengths.

  20. Optical response of mixed methylammonium lead iodide and formamidinium tin iodide perovskite thin films

    NASA Astrophysics Data System (ADS)

    Ghimire, Kiran; Zhao, Dewei; Yan, Yanfa; Podraza, Nikolas J.

    2017-07-01

    Mixed tin (Sn) and lead (Pb) based perovskite thin films have been prepared by solution processing combining methylammonium lead iodide (MAPbI3) and formamidinium tin iodide (FASnI3) precursors. Optical response in the form of complex dielectric function (ɛ = ɛ1 + iɛ2) spectra and absorption coefficient (α) spectra of (FASnI3)1-x(MAPbI3)x based perovskite films have been extracted over a spectral range 0.74 to 5.89 eV using spectroscopic ellipsometry. Absorption band edge energy changes as a function of composition for films including FASnI3, MAPbI3, and mixed x = 0.20, 0.35, 0.40, and 0.6 (FASnI3)1-x(MAPbI3)x perovskites. (FASnI3)0.60(MAPbI3)0.4 is found to have the minimum absorption band edge energy near ˜1.2 eV.

  1. Optical response of mixed methylammonium lead iodide and formamidinium tin iodide perovskite thin films

    DOE PAGES

    Ghimire, Kiran; Zhao, Dewei; Yan, Yanfa; ...

    2017-07-13

    Here, mixed tin (Sn) and lead (Pb) based perovskite thin films have been prepared by solution processing combining methylammonium lead iodide (MAPbI3) and formamidinium tin iodide (FASnI3) precursors. Optical response in the form of complex dielectric function (ε = ε1 + iε2) spectra and absorption coefficient (α) spectra of (FASnI3)1-x(MAPbI3)x based perovskite films have been extracted over a spectral range 0.74 to 5.89 eV using spectroscopic ellipsometry. Absorption band edge energy changes as a function of composition for films including FASnI3, MAPbI3, and mixed x = 0.20, 0.35, 0.40, and 0.6 (FASnI3)1-x(MAPbI3)x perovskites. (FASnI3)0.60(MAPbI3)0.4 is found to have the minimummore » absorption band edge energy near ~1.2 eV.« less

  2. Purely electronic mechanism of electrolyte gating of indium tin oxide thin films

    DOE PAGES

    Leng, X.; Bozovic, I.; Bollinger, A. T.

    2016-08-10

    Epitaxial indium tin oxide films have been grown on both LaAlO3 and yttria-stabilized zirconia substrates using RF magnetron sputtering. Electrolyte gating causes a large change in the film resistance that occurs immediately after the gate voltage is applied, and shows no hysteresis during the charging/discharging processes. When two devices are patterned next to one another and the first one gated through an electrolyte, the second one shows no changes in conductance, in contrast to what happens in materials (like tungsten oxide) susceptible to ionic electromigration and intercalation. These findings indicate that electrolyte gating in indium tin oxide triggers a puremore » electronic process (electron depletion or accumulation, depending on the polarity of the gate voltage), with no electrochemical reactions involved. Electron accumulation occurs in a very thin layer near the film surface, which becomes highly conductive. These results contribute to our understanding of the electrolyte gating mechanism in complex oxides and may be relevant for applications of electric double layer transistor devices.« less

  3. Purely electronic mechanism of electrolyte gating of indium tin oxide thin films

    PubMed Central

    Leng, X.; Bollinger, A. T.; Božović, I.

    2016-01-01

    Epitaxial indium tin oxide films have been grown on both LaAlO3 and yttria-stabilized zirconia substrates using RF magnetron sputtering. Electrolyte gating causes a large change in the film resistance that occurs immediately after the gate voltage is applied, and shows no hysteresis during the charging/discharging processes. When two devices are patterned next to one another and the first one gated through an electrolyte, the second one shows no changes in conductance, in contrast to what happens in materials (like tungsten oxide) susceptible to ionic electromigration and intercalation. These findings indicate that electrolyte gating in indium tin oxide triggers a pure electronic process (electron depletion or accumulation, depending on the polarity of the gate voltage), with no electrochemical reactions involved. Electron accumulation occurs in a very thin layer near the film surface, which becomes highly conductive. These results contribute to our understanding of the electrolyte gating mechanism in complex oxides and may be relevant for applications of electric double layer transistor devices. PMID:27506371

  4. Cassiterite LA-MC-ICP-MS U/Pb and muscovite 40Ar/39Ar dating of tin deposits in the Tengchong-Lianghe tin district, NW Yunnan, China

    NASA Astrophysics Data System (ADS)

    Chen, Xiao-Cui; Hu, Rui-Zhong; Bi, Xian-Wu; Li, Hui-Min; Lan, Jiang-Bo; Zhao, Cheng-Hai; Zhu, Jing-Jing

    2014-10-01

    The Tengchong-Lianghe tin district in northwestern Yunnan, China, is an important tin mineralization area in the Sanjiang Tethyan Metallogenic Domain. There are three N-S trending granite belts in the Tengchong-Lianghe area, with emplacement ages ranging from Early Cretaceous to Late Cretaceous and Early Cenozoic. Tin mineralization is spatially associated with these granitic rocks. However, the petrogenetic link between the tin deposits and the host granites is not clear because of the lack of age data for the tin mineralization. We investigate the possibility of direct dating of cassiterite from three typical tin deposits in the Tengchong-Lianghe tin district, using laser ablation multicollector inductively coupled plasma mass spectrometry (LA-MC-ICP-MS). In situ LA-MC-ICP-MS dating of seven cassiterite samples from the Lailishan (LLS-1 and LLS-2), Xiaolonghe (XLH, WDS, DSP, and HJS), and Tieyaoshan (TYS) tin deposits yielded well-defined 206Pb/207Pb-238U/207Pb isochron ages. To assess the accuracy of the in situ U/Pb dating of cassiterite, 40Ar/39Ar dating of coexisting muscovite (in samples LLS-1, DSP, and TYS) was also performed. The cassiterite in situ U/Pb ages (47.4 ± 2.0, 71.9 ± 2.3, and 119.3 ± 1.7 Ma, respectively) are in excellent agreement with the coexisting muscovite 40Ar/39Ar ages (48.4 ± 0.3, 71.9 ± 1.4, and 122.4 ± 0.7 Ma, respectively). The U/Pb ages of cassiterite combined with the 40Ar/39Ar ages of muscovite indicate that there are three tin mineralization events in this district: the Lailishan tin deposit at 47.4 ± 2.0 to 52 ± 2.7 Ma, the Xiaolonghe tin deposit at 71.6 ± 2.4 to 3.9 ± 2.0 Ma, and the Tieyaoshan tin deposit at 119.3 ± 1.7 to 122.5 ± 0.7 Ma. These ages are highly consistent with the zircon U/Pb ages of the host granites. It is su.ggested that the Cretaceous tin mineralization might have taken place in a subduction environment, while the Early Tertiary tin metallogenesis was in a postcollisional geodynamic setting.

  5. A Continuing Story on the Secondary Electron Yield Measurements of TiN Coating and TiZrV Getter Film

    SciTech Connect

    Le Pimpec, F.

    2004-06-07

    In the beam pipe of the positron Main Damping Ring (MDR) of the Next Linear Collider (NLC), ionization of residual gases and secondary electron emission will give rise to an electron cloud which can cause the loss of the circulating beam. One path to avoid the electron cloud is to ensure that the vacuum wall has low secondary emission yield and, therefore, we need to know the secondary emission yield (SEY) for candidate wall coatings. We report on the ongoing SEY measurements at SLAC on titanium nitride (TiN) and titanium-zirconium-vanadium (TiZrV) thin sputter-deposited films, as well as their effects on simulations.

  6. Effect of process parameters on properties of argon–nitrogen plasma for titanium nitride film deposition

    SciTech Connect

    Saikia, Partha; Kakati, Bharat

    2013-11-15

    In this study, the effect of working pressure and input power on the physical properties and sputtering efficiencies of argon–nitrogen (Ar/N{sub 2}) plasma in direct current magnetron discharge is investigated. The discharge in Ar/N{sub 2} is used to deposit TiN films on high speed steel substrate. The physical plasma parameters are determined by using Langmuir probe and optical emission spectroscopy. On the basis of the different reactions in the gas phase, the variation of plasma parameters and sputtering rate are explained. A prominent change of electron temperature, electron density, ion density, and degree of ionization of Ar is found as a function of working pressure and input power. The results also show that increasing working pressure exerts a negative effect on film deposition rate while increasing input power has a positive impact on the same. To confirm the observed physical properties and evaluate the texture growth as a function of deposition parameters, x-ray diffraction study of deposited TiN films is also done.

  7. Studies of Niobium Thin Film Produced by Energetic Vacuum Deposition

    SciTech Connect

    Genfa Wu; Anne-Marie Valente; H. Phillips; Haipeng Wang; Andy Wu; T. J. Renk; P Provencio

    2004-05-01

    An energetic vacuum deposition system has been used to study deposition energy effects on the properties of niobium thin films on copper and sapphire substrates. The absence of working gas avoids the gaseous inclusions commonly seen with sputtering deposition. A biased substrate holder controls the deposition energy. Transition temperature and residual resistivity ratio of the niobium thin films at several deposition energies are obtained together with surface morphology and crystal orientation measurements by AFM inspection, XRD and TEM analysis. The results show that niobium thin films on sapphire substrate exhibit the best cryogenic properties at deposition energy around 123 eV. The TEM analysis revealed that epitaxial growth of film was evident when deposition energy reaches 163 eV for sapphire substrate. Similarly, niobium thin film on copper substrate shows that film grows more oriented with higher deposition energy and grain size reaches the scale of the film thickness at the deposition energy around 153 eV.

  8. Venting temperature determines surface chemistry of magnetron sputtered TiN films

    NASA Astrophysics Data System (ADS)

    Greczynski, G.; Mráz, S.; Hultman, L.; Schneider, J. M.

    2016-01-01

    Surface properties of refractory ceramic transition metal nitride thin films grown by magnetron sputtering are essential for resistance towards oxidation necessary in all modern applications. Here, typically neglected factors, including exposure to residual process gases following the growth and the venting temperature Tv, each affecting the surface chemistry, are addressed. It is demonstrated for the TiN model materials system that Tv has a substantial effect on the composition and thickness-evolution of the reacted surface layer and should therefore be reported. The phenomena are also shown to have impact on the reliable surface characterization by x-ray photoelectron spectroscopy.

  9. Venting temperature determines surface chemistry of magnetron sputtered TiN films

    SciTech Connect

    Greczynski, G.; Mráz, S.; Schneider, J. M.; Hultman, L.

    2016-01-25

    Surface properties of refractory ceramic transition metal nitride thin films grown by magnetron sputtering are essential for resistance towards oxidation necessary in all modern applications. Here, typically neglected factors, including exposure to residual process gases following the growth and the venting temperature T{sub v}, each affecting the surface chemistry, are addressed. It is demonstrated for the TiN model materials system that T{sub v} has a substantial effect on the composition and thickness-evolution of the reacted surface layer and should therefore be reported. The phenomena are also shown to have impact on the reliable surface characterization by x-ray photoelectron spectroscopy.

  10. Ultra-Smooth As-Deposited Optical Films

    DTIC Science & Technology

    2007-11-02

    thin films with state-of-the-art properties , specifically ultrasmooth surfaces, high packing density, refractive index close... properties of thin films ; in particular, the surface roughness of the thin films . And secondarily, the lifetime of the Cs source is important. In other... Film Deposition Initially, the deposition system was utilized to deposit single layer thin films of titanium oxide ( TiO2 ) and silicon oxide

  11. Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide

    NASA Astrophysics Data System (ADS)

    Mackus, Adriaan J. M.; MacIsaac, Callisto; Kim, Woo-Hee; Bent, Stacey F.

    2017-02-01

    For atomic layer deposition (ALD) of doped, ternary, and quaternary materials achieved by combining multiple binary ALD processes, it is often difficult to correlate the material properties and growth characteristics with the process parameters due to a limited understanding of the underlying surface chemistry. In this work, in situ Fourier transform infrared (FTIR) spectroscopy was employed during ALD of zinc-oxide, tin-oxide, and zinc-tin-oxide (ZTO) with the precursors diethylzinc (DEZ), tetrakis(dimethylamino)tin (TDMASn), and H2O. The main aim was to investigate the molecular basis for the nucleation delay during ALD of ZTO, observed when ZnO ALD is carried out after SnO2 ALD. Gas-phase FTIR spectroscopy showed that dimethylamine, the main reaction product of the SnO2 ALD process, is released not only during SnO2 ALD but also when depositing ZnO after SnO2, indicating incomplete removal of the ligands of the TDMASn precursor from the surface. Transmission FTIR spectroscopy performed during ALD on SiO2 powder revealed that a significant fraction of the ligands persist during both SnO2 and ZnO ALD. These observations provide experimental evidence for a recently proposed mechanism, based on theoretical calculations, suggesting that the elimination of precursor ligands is often not complete. In addition, it was found that the removal of precursor ligands by H2O exposure is even less effective when ZnO ALD is carried out after SnO2 ALD, which likely causes the nucleation delay in ZnO ALD during the deposition of ZTO. The underlying mechanisms and the consequences of the incomplete elimination of precursor ligands are discussed.

  12. Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide.

    PubMed

    Mackus, Adriaan J M; MacIsaac, Callisto; Kim, Woo-Hee; Bent, Stacey F

    2017-02-07

    For atomic layer deposition (ALD) of doped, ternary, and quaternary materials achieved by combining multiple binary ALD processes, it is often difficult to correlate the material properties and growth characteristics with the process parameters due to a limited understanding of the underlying surface chemistry. In this work, in situ Fourier transform infrared (FTIR) spectroscopy was employed during ALD of zinc-oxide, tin-oxide, and zinc-tin-oxide (ZTO) with the precursors diethylzinc (DEZ), tetrakis(dimethylamino)tin (TDMASn), and H2O. The main aim was to investigate the molecular basis for the nucleation delay during ALD of ZTO, observed when ZnO ALD is carried out after SnO2 ALD. Gas-phase FTIR spectroscopy showed that dimethylamine, the main reaction product of the SnO2 ALD process, is released not only during SnO2 ALD but also when depositing ZnO after SnO2, indicating incomplete removal of the ligands of the TDMASn precursor from the surface. Transmission FTIR spectroscopy performed during ALD on SiO2 powder revealed that a significant fraction of the ligands persist during both SnO2 and ZnO ALD. These observations provide experimental evidence for a recently proposed mechanism, based on theoretical calculations, suggesting that the elimination of precursor ligands is often not complete. In addition, it was found that the removal of precursor ligands by H2O exposure is even less effective when ZnO ALD is carried out after SnO2 ALD, which likely causes the nucleation delay in ZnO ALD during the deposition of ZTO. The underlying mechanisms and the consequences of the incomplete elimination of precursor ligands are discussed.

  13. Nanostructured tin oxide films: Physical synthesis, characterization, and gas sensing properties.

    PubMed

    Ingole, S M; Navale, S T; Navale, Y H; Bandgar, D K; Stadler, F J; Mane, R S; Ramgir, N S; Gupta, S K; Aswal, D K; Patil, V B

    2017-05-01

    Nanostructured tin oxide (SnO2) films are synthesized using physical method i.e. thermal evaporation and are further characterized with X-ray diffraction, X-ray photoelectron spectroscopy, scanning electron microscopy, transmission electron microscopy, and atomic force microscopy measurement techniques for confirming its structure and morphology. The chemiresistive properties of SnO2 films are studied towards different oxidizing and reducing gases where these films have demonstrated considerable selectivity towards oxidizing nitrogen dioxide (NO2) gas with a maximum response of 403% to 100ppm @200°C, and fast response and recovery times of 4s and 210s, respectively, than other test gases. In addition, SnO2 films are enabling to detect as low as 1ppm NO2 gas concentration @200°C with 23% response enhancement. Chemiresistive performances of SnO2 films are carried out in the range of 1-100ppm and reported. Finally, plausible adsorption and desorption reaction mechanism of NO2 gas molecules with SnO2 film surface has been thoroughly discussed by means of an impedance spectroscopy analysis. Copyright © 2017 Elsevier Inc. All rights reserved.

  14. RBS and PIXE analysis of chlorine contamination in ALD-Grown TiN films on silicon

    SciTech Connect

    Meersschaut, J.; Witters, T.; Kaeyhkoe, M.; Lenka, H. P.; Vandervorst, W.; Zhao, Q.; Vantomme, A.

    2013-04-19

    The performance, strengths and limitations of RBS and PIXE for the characterization of trace amounts of Cl in TiN thin films are critically compared. The chlorine atomic concentration in ALD grown TiN thin films on Si is determined for samples grown at temperatures ranging from 350 Degree-Sign C to 550 Degree-Sign C. We show that routine Rutherford backscattering spectrometry measurements (1.5 MeV He{sup +}) and PIXE measurements (1.5 MeV H{sup +}) on 20 nm thick TiN films allow one to determine the Cl content down to 0.3 at% with an absolute statistical accuracy reaching 0.03 at%. Possible improvements to push the sensitivity limit for both approaches are proposed.

  15. Plasma-enhanced chemical vapor deposition of tungsten films

    NASA Astrophysics Data System (ADS)

    Chu, J. K.; Tang, C. C.; Hess, D. W.

    1982-07-01

    High-purity films of tungsten are deposited from tungsten hexafluoride and hydrogen using plasma-enhanced deposition (PED). At 400 °C deposition temperature, resistivities of ˜40 μΩ cm are attained. After annealing at 1100 °C, the resistivity falls to ˜7 μΩ cm. Below 400 °C, the as-deposited film stress is <6×109 dynes/cm2. Tensile, unlike tungsten, molybdenum films deposited by PED displayed high resistivities.

  16. Silicon carbide and other films and method of deposition

    NASA Technical Reports Server (NTRS)

    Mehregany, Mehran (Inventor); Zorman, Christian A. (Inventor); Fu, Xiao-An (Inventor); Dunning, Jeremy L. (Inventor)

    2007-01-01

    A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.

  17. Silicon carbide and other films and method of deposition

    NASA Technical Reports Server (NTRS)

    Mehregany, Mehran (Inventor); Zorman, Christian A. (Inventor); Fu, Xiao-An (Inventor); Dunning, Jeremy (Inventor)

    2011-01-01

    A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.

  18. Application of indium tin oxide (ITO) thin film as a low emissivity film on Ni-based alloy at high temperature

    NASA Astrophysics Data System (ADS)

    Sun, Kewei; Zhou, Wancheng; Tang, Xiufeng; Luo, Fa

    2016-09-01

    Indium tin oxide (ITO) films as the low emissivity coatings of Ni-based alloy at high temperature were studies. ITO films were deposited on the polished surface of alloy K424 by direct current magnetron sputtering. These ITO-coated samples were heat-treated in air at 600-900 °C for 150 h to explore the effect of high temperature environment on the emissivity. The samples were analyzed by X-ray diffraction (XRD), SEM and EDS. The results show that the surface of sample is integrity after heat processing at 700 °C and below it. A small amount of fine crack is observed on the surface of sample heated at 800 °C and Ti oxide appears. There are lots of fine cracks on the sample annealed at 900 °C and a large number of various oxides are detected. The average infrared emissivities at 3-5 μm and 8-14 μm wavebands were tested by an infrared emissivity measurement instrument. The results show the emissivity of the sample after annealed at 600 and 700 °C is still kept at a low value as the sample before annealed. The ITO film can be used as a low emissivity coating of super alloy K424 up to 700 °C.

  19. Pulsed laser deposition of ferroelectric thin films

    NASA Astrophysics Data System (ADS)

    Sengupta, Somnath; McKnight, Steven H.; Sengupta, Louise C.

    1997-05-01

    It has been shown that in bulk ceramic form, the barium to strontium ratio in barium strontium titanium oxide (Ba1- xSrxTiO3, BSTO) affects the voltage tunability and electronic dissipation factor in an inverse fashion; increasing the strontium content reduces the dissipation factor at the expense of lower voltage tunability. However, the oxide composites of BSTO developed at the Army Research Laboratory still maintain low electronic loss factors for all compositions examined. The intent of this study is to determine whether such effects can be observed in the thin film form of the oxide composites. The pulsed laser deposition (PLD) method has been used to deposit the thin films. The different compositions of the compound (with 1 wt% of the oxide additive) chosen were: Ba0.3Sr0.7TiO3, Ba0.4Sr0.6TiO3, Ba0.5Sr0.5TiO3, Ba0.6Sr0.4TiO3, and Ba0.7Sr0.3TiO3. The electronic properties investigated in this study were the dielectric constant and the voltage tunability. The morphology of the thin films were examined using the atomic force microscopy. Fourier transform Raman spectroscopy was also utilized for optical characterization of the thin films. The electronic and optical properties of the thin films and the bulk ceramics were compared. The results of these investigations are discussed.

  20. Pulsed laser deposition of transparent conductive oxide thin films on flexible substrates

    NASA Astrophysics Data System (ADS)

    Socol, G.; Socol, M.; Stefan, N.; Axente, E.; Popescu-Pelin, G.; Craciun, D.; Duta, L.; Mihailescu, C. N.; Mihailescu, I. N.; Stanculescu, A.; Visan, D.; Sava, V.; Galca, A. C.; Luculescu, C. R.; Craciun, V.

    2012-11-01

    The influence of target-substrate distance during pulsed laser deposition of indium zinc oxide (IZO), indium tin oxide (ITO) and aluminium-doped zinc oxide (AZO) thin films grown on polyethylene terephthalate (PET) substrates was investigated. It was found that the properties of such flexible transparent conductive oxide (TCO)/PET electrodes critically depend on this parameter. The TCO films that were deposited at distances of 6 and 8 cm exhibited an optical transmittance higher than 90% in the visible range and electrical resistivities around 5 × 10-4 Ω cm. In addition to these excellent electrical and optical characteristics the films grown at 8 cm distance were homogenous, smooth, adherent, and without cracks or any other extended defects, being suitable for opto-electronic device applications.

  1. Photoelectrochemical properties of spray deposited n-CdSe thin films

    SciTech Connect

    Yadav, A.A.; Barote, M.A.; Masumdar, E.U.

    2010-05-15

    Polycrystalline cadmium selenide (CdSe) thin films have been prepared by spraying a mixture of an equimolar aqueous solutions of cadmium chloride and selenourea on preheated fluorine doped tin oxide (FTO) coated glass substrates at different substrate temperatures. The cell configuration n-CdSe/1 M (NaOH + Na{sub 2}S + S)/C is used for studying the capacitance-voltage (C-V) characteristics in dark, current-voltage (I-V) characteristics in dark and under illumination, photovoltaic power output and spectral response characteristics of the as deposited films. Photoelectrochemical study shows that as deposited CdSe thin films exhibits n-type of conductivity. The spectral response characteristics of the films at room temperature show a prominent sharp peak at 725 nm. The measured values of efficiency ({eta}) and fill factor (FF) are found to be 0.50% and 0.44 respectively for film deposited at 300 C. Electrochemical impedance spectroscopy studies show that the CdSe film deposited at 300 C shows better performance in PEC cell. (author)

  2. Pulsed laser deposition of pepsin thin films

    NASA Astrophysics Data System (ADS)

    Kecskeméti, G.; Kresz, N.; Smausz, T.; Hopp, B.; Nógrádi, A.

    2005-07-01

    Pulsed laser deposition (PLD) of organic and biological thin films has been extensively studied due to its importance in medical applications among others. Our investigations and results on PLD of a digestion catalyzing enzyme, pepsin, are presented. Targets pressed from pepsin powder were ablated with pulses of an ArF excimer laser ( λ = 193 nm, FWHM = 30 ns), the applied fluence was varied between 0.24 and 5.1 J/cm 2. The pressure in the PLD chamber was 2.7 × 10 -3 Pa. The thin layers were deposited onto glass and KBr substrates. Our IR spectroscopic measurements proved that the chemical composition of deposited thin films is similar to that of the target material deposited at 0.5 and 1.3 J/cm 2. The protein digesting capacity of the transferred pepsin was tested by adapting a modified "protein cube" method. Dissolution of the ovalbumin sections proved that the deposited layers consisted of catalytically active pepsin.

  3. Apparatus for laser assisted thin film deposition

    DOEpatents

    Warner, Bruce E.; McLean, II, William

    1996-01-01

    A pulsed laser deposition apparatus uses fiber optics to deliver visible output beams. One or more optical fibers are coupled to one or more laser sources, and delivers visible output beams to a single chamber, to multiple targets in the chamber or to multiple chambers. The laser can run uninterrupted if one of the deposition chambers ceases to operate because other chambers can continue their laser deposition processes. The laser source can be positioned at a remote location relative to the deposition chamber. The use of fiber optics permits multi-plexing. A pulsed visible laser beam is directed at a generally non-perpendicular angle upon the target in the chamber, generating a plume of ions and energetic neutral species. A portion of the plume is deposited on a substrate as a thin film. A pulsed visible output beam with a high pulse repetition frequency is used. The high pulse repetition frequency is greater than 500 Hz, and more preferably, greater than about 1000 Hz. Diamond-like-carbon (DLC) is one of the thin films produced using the apparatus.

  4. Apparatus for laser assisted thin film deposition

    DOEpatents

    Warner, B.E.; McLean, W. II

    1996-02-13

    A pulsed laser deposition apparatus uses fiber optics to deliver visible output beams. One or more optical fibers are coupled to one or more laser sources, and delivers visible output beams to a single chamber, to multiple targets in the chamber or to multiple chambers. The laser can run uninterrupted if one of the deposition chambers ceases to operate because other chambers can continue their laser deposition processes. The laser source can be positioned at a remote location relative to the deposition chamber. The use of fiber optics permits multi-plexing. A pulsed visible laser beam is directed at a generally non-perpendicular angle upon the target in the chamber, generating a plume of ions and energetic neutral species. A portion of the plume is deposited on a substrate as a thin film. A pulsed visible output beam with a high pulse repetition frequency is used. The high pulse repetition frequency is greater than 500 Hz, and more preferably, greater than about 1000 Hz. Diamond-like-carbon (DLC) is one of the thin films produced using the apparatus. 9 figs.

  5. Deposition and characterization of CuInS2 thin films deposited over copper thin films

    NASA Astrophysics Data System (ADS)

    Thomas, Titu; Kumar, K. Rajeev; Kartha, C. Sudha; Vijayakumar, K. P.

    2015-06-01

    Simple, cost effective and versatile spray pyrolysis method is effectively combined with vacuum evaporation for the deposition of CuIns2 thin films for photovoltaic applications. In the present study In2s3 was spray deposited over vacuum evaporated Cu thin films and Cu was allowed to diffuse in to the In2S3 layer to form CuInS2. To analyse the dependence of precursor volume on the formation of CuInS2 films structural, electrical and morphological analzes are carried out. Successful deposition of CuInS2thin films with good crystallinity and morphology with considerably low resistivity is reported in this paper.

  6. Polymer waveguide sensor with tin oxide thin film integrated onto optical-electrical printed circuit board

    NASA Astrophysics Data System (ADS)

    Lim, Jung Woon; Kim, Seon Hoon; Kim, Jong-Sup; Kim, Jeong Ho; Kim, Yune Hyoun; Lim, Ju Young; Im, Young-Eun; Park, Jong Bok; Hann, Swook

    2014-05-01

    In this study, we proposed and fabricated optical sensor module integrated onto optical-electrical printed circuit board (PCB) for gas detection based on polymer waveguide with tin oxide thin film. Their potential application as gas sensors are confirmed through computational simulation using the two dimensional finite-difference time-domain method (2DFDTD). Optical-electrical PCB was integrated into vertical cavity surface emitting laser (VCSEL), photodiode and polymeric sensing device was fabricated by the nano-imprint lithography technique. SnO2 thin film of 100nm thickness was placed on the surface of core layer exposed by removing the specific area of the upper cladding layer of 300 μm length and 50 μm width. The performance of the device was measured experimentally. Initial study on the sensor performance for carbon monoxide gas detection indicated good sensitivity.

  7. Reentrant Resistive Behavior and Dimensional Crossover in Disordered Superconducting TiN Films.

    PubMed

    Postolova, Svetlana V; Mironov, Alexey Yu; Baklanov, Mikhail R; Vinokur, Valerii M; Baturina, Tatyana I

    2017-05-11

    A reentrant temperature dependence of the normal state resistance often referred to as the N-shaped temperature dependence, is omnipresent in disordered superconductors - ranging from high-temperature cuprates to ultrathin superconducting films - that experience superconductor-to-insulator transition. Yet, despite the ubiquity of this phenomenon its origin still remains a subject of debate. Here we investigate strongly disordered superconducting TiN films and demonstrate universality of the reentrant behavior. We offer a quantitative description of the N-shaped resistance curve. We show that upon cooling down the resistance first decreases linearly with temperature and then passes through the minimum that marks the 3D-2D crossover in the system. In the 2D temperature range the resistance first grows with decreasing temperature due to quantum contributions and eventually drops to zero as the system falls into a superconducting state. Our findings demonstrate the prime importance of disorder in dimensional crossover effects.

  8. Reclaim System Design of Indium Tin Oxide Thin-Film Removal from Color Filters of Displays

    NASA Astrophysics Data System (ADS)

    Pa, Pai-Shan

    2008-09-01

    A newly design precision reclaim system using electrochemical machining as an etching process for indium tin oxide (ITO) thin-film removal from the color filter surface of a displays is presented. Through the ultra precise etching of the nanostructure, the semiconductor industry can effectively recycle defective products, thereby reducing production costs. A large gyration diameter of a cathode combined with a small gap width between the cathode and a workpiece takes less time for the same amount of ITO removed. An adequate feed rate of color filters combined with a sufficient electric power produces fast machining. Pulsed direct current and higher rotational speed of the cathode can improve the effects of dregs discharge and are advantageous to be combined with a high feed rate of workpieces. Electrochemical machining only requires a short time to easily and cleanly remove ITO films.

  9. Impact of Sodium Contamination in Tin Sulfide Thin-Film Solar Cells

    DOE PAGES

    Steinmann, Vera; Brandt, Riley E.; Chakraborty, Rupak; ...

    2016-02-12

    Empirical observations show that sodium(Na) is a benign contaminant in some thin-filmsolar cells. Here, we intentionally contaminate thermally evaporated tin sulfide (SnS)thin-films with sodium and measure the SnS absorber properties and solar cellcharacteristics. The carrier concentration increases from 2 × 1016 cm-3 to 4.3 × 1017 cm-3 in Na-doped SnSthin-films, when using a 13 nm NaCl seed layer, which is detrimental for SnS photovoltaic applications but could make Na-doped SnS an attractive candidate in thermoelectrics. We observed trends in carrier concentration and found that it is in good agreement with density functional theory calculations, which predict an acceptor-type NaSn defectmore » with low formation energy.« less

  10. Time and voltage dependences of nanoscale dielectric constant modulation on indium tin oxide films

    NASA Astrophysics Data System (ADS)

    Li, Liang; Hao, Haoyue; Zhao, Hua

    2017-01-01

    The modulation of indium tin oxide (ITO) films through surface charge accumulation plays an important role in many different applications. In order to elaborately study the modulation, we measured the dielectric constant of the modulated layer through examining the excitation of surface plasmon polaritons. Charges were pumped on the surfaces of ITO films through applying high voltage in appropriate directions. Experiments unveiled that the dielectric constant of the modulated layer had large variation along with the nanoscale charge accumulation. Corresponding numerical results were worked out through combining Drude model and Mayadas-Shatzkes model. Based on the above results, we deduced the time and voltage dependences of accumulated charge density, which revealed a long-time charge accumulation process.

  11. Synthesis and photoluminescence property of nanostructured sol-gel antimony tin oxide film on silica glass

    NASA Astrophysics Data System (ADS)

    Dua, Laxmikanta; Biswas, Prasanta K.

    2013-05-01

    Sol-gel based spin coated nanostructured films of tetragonal phase of antimony (10 at%) doped tin oxide (ATO) were prepared on silica glass. XRD and TEM images identify the crystallite size lying in the range, ∼3.4-9.8 nm. Quantum confinement was observed in the nanoclusters. Evaluated band gaps at 3.62 eV correspond to the transition for bulk ATO and 4.51 eV, 5.26 eV for excitons and oxygen deficiency. Schemes have been proposed for absorption and photoluminescence excitation (PLE). Two excitonic transitions were observed at 275 nm and 310 nm for different nanocluster sizes. Evaluation of mean free path and Fermi energy correspond to ionized scattering and degeneracy of the ATO films.

  12. Substrate heater for thin film deposition

    DOEpatents

    Foltyn, Steve R.

    1996-01-01

    A substrate heater for thin film deposition of metallic oxides upon a target substrate configured as a disk including means for supporting in a predetermined location a target substrate configured as a disk, means for rotating the target substrate within the support means, means for heating the target substrate within the support means, the heating means about the support means and including a pair of heating elements with one heater element situated on each side of the predetermined location for the target substrate, with one heater element defining an opening through which desired coating material can enter for thin film deposition and with the heating means including an opening slot through which the target substrate can be entered into the support means, and, optionally a means for thermal shielding of the heating means from surrounding environment is disclosed.

  13. Effect of aging heat time and annealing temperature on the properties of nanocrystalline tin dioxide thin films

    NASA Astrophysics Data System (ADS)

    Kadhim, Imad H.; Abu Hassan, H.

    2017-04-01

    Nanocrystalline tin dioxide (SnO2) thin films have been successfully prepared by sol-gel spin-coating technique on p-type Si (100) substrates. A stable solution was prepared by mixing tin(II) chloride dihydrate, pure ethanol, and glycerin. Temperature affects the properties of SnO2 thin films, particularly the crystallite size where the crystallization of SnO2 with tetragonal rutile structure is achieved when thin films that prepared under different aging heat times are annealed at 400∘C. By increasing aging heat time in the presence of annealing temperatures the FESEM images indicated that the thickness of the fabricated film was directly proportional to solution viscosity, increasing from approximately 380 nm to 744 nm, as well as the crystallization of the thin films improved and reduced defects.

  14. Fabrication of organic-inorganic perovskite thin films for planar solar cells via pulsed laser deposition

    SciTech Connect

    Liang, Yangang; Zhang, Xiaohang; Gong, Yunhui; Shin, Jongmoon; Wachsman, Eric D.; Takeuchi, Ichiro; Yao, Yangyi; Hsu, Wei-Lun; Dagenais, Mario

    2016-01-15

    We report on fabrication of organic-inorganic perovskite thin films using a hybrid method consisting of pulsed laser deposition (PLD) of lead iodide and spin-coating of methylammonium iodide. Smooth and highly crystalline CH{sub 3}NH{sub 3}PbI{sub 3} thin films have been fabricated on silicon and glass coated substrates with fluorine doped tin oxide using this PLD-based hybrid method. Planar perovskite solar cells with an inverted structure have been successfully fabricated using the perovskite films. Because of its versatility, the PLD-based hybrid fabrication method not only provides an easy and precise control of the thickness of the perovskite thin films, but also offers a straightforward platform for studying the potential feasibility in using other metal halides and organic salts for formation of the organic-inorganic perovskite structure.

  15. Fabrication of organic-inorganic perovskite thin films for planar solar cells via pulsed laser deposition

    NASA Astrophysics Data System (ADS)

    Liang, Yangang; Yao, Yangyi; Zhang, Xiaohang; Hsu, Wei-Lun; Gong, Yunhui; Shin, Jongmoon; Wachsman, Eric D.; Dagenais, Mario; Takeuchi, Ichiro

    2016-01-01

    We report on fabrication of organic-inorganic perovskite thin films using a hybrid method consisting of pulsed laser deposition (PLD) of lead iodide and spin-coating of methylammonium iodide. Smooth and highly crystalline CH3NH3PbI3 thin films have been fabricated on silicon and glass coated substrates with fluorine doped tin oxide using this PLD-based hybrid method. Planar perovskite solar cells with an inverted structure have been successfully fabricated using the perovskite films. Because of its versatility, the PLD-based hybrid fabrication method not only provides an easy and precise control of the thickness of the perovskite thin films, but also offers a straightforward platform for studying the potential feasibility in using other metal halides and organic salts for formation of the organic-inorganic perovskite structure.

  16. Boron carbon nitride films deposited by sequential pulses laser deposition

    NASA Astrophysics Data System (ADS)

    Dinescu, M.; Perrone, A.; Caricato, A. P.; Mirenghi, L.; Gerardi, C.; Ghica, C.; Frunza, L.

    1998-05-01

    In this paper, we report the successful growth of c-BCN thin films by reactive pulsed laser ablation (RPLA) of a rotating target (3 Hz) formed of two semidisks: one of h-BN and the other one of graphite, with the substrate at room temperature. The irradiations were performed in vacuum (10 -5 Pa) and in N 2 ambient gas (1-100 Pa) using a XeCl excimer laser ( λ=308 nm, τFWHM=30 ns) with a fluence of 5 J/cm 2. Series of 10,000 pulses at a repetition rate of 10 Hz were directed to target. Different analysis techniques pointed out the synthesis of h-BCN and c-BCN. Microhardness measurements at the deposited films evidence high values up to 2.9 GPa. Secondary ion mass spectroscopy (SIMS) profiles showed the presence of layers of 600-700 nm thickness, with uniform concentrations of B, C and N in the films. Uniform signals of BN and CN, which are related to the BCN bond, are also present. X-ray photoelectron spectroscopy (XPS) studies pointed out the BCN compound formation. The deconvolution of B 1s recorded spectra evidenced a strong peak (centered at 188 eV) assigned to B bonded in BC 2N; the N 1s and C 1s spectra also confirm the BCN formation. Transmission electron microscopy (TEM) and selected area electron diffraction (SAED) analysis evidenced the presence of c-BCN phase (with crystallites of 30-80 nm) and h-BCN phase as well. The N 2 pressure strongly influenced the BCN formation and, consequently, the properties of the deposited films.

  17. Optical and electrochemical properties of optically transparent, boron-doped diamond thin films deposited on quartz.

    PubMed

    Stotter, Jason; Zak, Jerzy; Behler, Zack; Show, Yoshiuki; Swain, Greg M

    2002-12-01

    The optical and electrochemical properties of transparent, boron-doped diamond thin film, deposited on quartz, are discussed. The films were deposited by microwave-assisted chemical vapor deposition, for 1-2 h, using a 0.5% CH4/H2 source gas mixture at 45 Torr and 600 W of power. A high rate of diamond nucleation was achieved by mechanically scratching the quartz. This pretreatment leads to the formation of a continuous film, in a short period of time, which consists of nanometer-sized grains of diamond. The thin-film electrode was characterized by cyclic voltammetry, atomic force microscopy, and UV-visible absorption spectrophotometry. The film's electrochemical response was evaluated using Ru(NH3)6(3+/2+) in 1 M KCl, Fe(CN)6(3-/4-) in 1 M KCl, and chlorpromazine (CPZ) in 10 mM HClO4. The film exhibited a low voltammetric background current and a stable and active voltammetric response for all three redox systems. The optical transparency of the polycrystalline film in the visible region was near 50% and fairly constant between 300 and 800 nm. The optical and electrical properties were extremely stable during 48-h exposure tests in various aqueous (HNO3, NaOH) solutions and nonaqueous (e.g., chlorinated) solvents. The properties were also extremely stable during anodic and cathodic potential cycling in harsh aqueous environments. This stability is in stark contrast to what was observed for an indium-doped tin oxide thin film coated on quartz. The spectroelectrochemical response (transmission mode) for CPZ was studied in detail, using a thin-layer spectroelectrochemical cell. Thin-layer voltammetry, potential step/ absorption measurements, and detection analytical figures of merit are presented. The results demonstrate that durable, stable, and optically transparent diamond thin films, with low electrical resistivity (approximately 0.026 omega x cm) laterally through the film, can be deposited on quartz.

  18. Fabrication and characterization of the electrical and optical properties of n-type thin film transparent conducting oxides deposited by neutralized ion beam sputtering and pulsed laser deposition

    NASA Astrophysics Data System (ADS)

    Vanderford, John D.

    Transparent conducting oxides have become a fundamental electronic material for numerous current technologies and are optimally deposited as a uniform thin film with low electrical resistivity and high optical transmission. The purpose of this study is to characterize the electrical and optical characteristics of three TCO: Indium Tin Oxide (ITO) (95%, 5%), Zinc Oxide (ZnO), and Aluminum doped Zinc Oxide (AZO) (98%, 2%). The deposition techniques of neutralized ion beam sputtering and pulsed laser deposition will be investigated. ITO will be deposited from commercially available sintered targets whereas ZnO and AZO will be deposited from powder pressed targets. The results have shown that AZO deposit AZO from a powder pressed target with comparable electrical and optical properties to that of ITO deposited from a sintered target.

  19. Improving the optoelectronic properties of titanium-doped indium tin oxide thin films

    NASA Astrophysics Data System (ADS)

    Taha, Hatem; Jiang, Zhong-Tao; Henry, David J.; Amri, Amun; Yin, Chun-Yang; Mahbubur Rahman, M.

    2017-06-01

    The focus of this study is on a sol-gel method combined with spin-coating to prepare high-quality transparent conducting oxide (TCO) films. The structural, morphological, optical and electrical properties of sol-gel-derived pure and Ti-doped indium tin oxide (ITO) thin films were studied as a function of the concentration of the Ti (i.e. 0 at%, 2 at% and 4 at%) and annealing temperatures (150 °C-600 °C). FESEM measurements indicate that all the films are ˜350 nm thick. XRD analysis confirmed the cubic bixbyite structure of the polycrystalline indium oxide phase for all of the thin films. Increasing the Ti ratio, as well as the annealing temperature, improved the crystallinity of the films. Highly crystalline structures were obtained at 500 °C, with average grain sizes of about 50, 65 and 80 nm for Ti doping of 0 at%, 2 at% and 4 at%, respectively. The electrical and optical properties improved as the annealing temperature increased, with an enlarged electronic energy band gap and an optical absorption edge below 280 nm. In particular, the optical transmittance and electrical resistivity of the samples with a 4 at% Ti content improved from 87% and 7.10 × 10-4 Ω.cm to 92% and 1.6 × 10-4 Ω.cm, respectively. The conductivity, especially for the annealing temperature at 150 °C, is acceptable for many applications such as flexible electronics. These results demonstrate that unlike the more expensive and complex vacuum sputtering process, high-quality Ti-doped ITO films can be achieved by fast processing, simple wet-chemistry, and easy doping level control with the possibility of producing films with high scalability.

  20. Boron doped nanostructure ZnO films deposited by ultrasonic spray pyrolysis

    NASA Astrophysics Data System (ADS)

    Karakaya, Seniye; Ozbas, Omer

    2015-02-01

    ZnO is an II-VI compound semiconductor with a wide direct band gap of 3.3 eV at room temperature. Doped with group III elements (B, Al or Ga), it becomes an attractive candidate to replace tin oxide (SnO2) or indium tin oxide (ITO) as transparent conducting electrodes in solar cell devices and flat panel display due to competitive electrical and optical properties. In this work, ZnO and boron doped ZnO (ZnO:B) films have been deposited onto glass substrates at 350 ± 5 °C by a cost-efficient ultrasonic spray pyrolysis technique. The optical, structural, morphological and electrical properties of nanostructure undoped and ZnO:B films have been investigated. Electrical resistivity of films has been analyzed by four-probe technique. Optical properties and thicknesses of the films have been examined in the wavelength range 1200-1600 nm by using spectroscopic ellipsometry (SE) measurements. The optical constants (refractive index (n) and extinction coefficient (k)) and the thicknesses of the films have been fitted according to Cauchy model. The optical method has been used to determine the band gap value of the films. Transmission spectra have been taken by UV spectrophotometer. It is found that both ZnO and ZnO:B films have high average optical transmission (≥80%). X-ray diffraction (XRD) patterns indicate that the obtained ZnO has a hexagonal wurtzite type structure. The morphological properties of the films were studied by atomic force microscopy (AFM). The surface morphology of the nanostructure films is found to depend on the concentration of B. As a result, ZnO:B films are promising contender for their potential use as transparent window layer and electrodes in solar cells.

  1. Positron beam study of indium tin oxide films on GaN

    NASA Astrophysics Data System (ADS)

    Cheung, C. K.; Wang, R. X.; Beling, C. D.; Djurisic, A. B.; Fung, S.

    2007-02-01

    Variable energy Doppler broadening spectroscopy has been used to study open-volume defects formed during the fabrication of indium tin oxide (ITO) thin films grown by electron-beam evaporation on n-GaN. The films were prepared at room temperature, 200 and 300 °C without oxygen and at 200 °C under different oxygen partial pressures. The results show that at elevated growth temperatures the ITO has fewer open volume sites and grows with a more crystalline structure. High temperature growth, however, is not sufficient in itself to remove open volume defects at the ITO/GaN interface. Growth under elevated temperature and under partial pressure of oxygen is found to further reduce the vacancy type defects associated with the ITO film, thus improving the quality of the film. Oxygen partial pressures of 6 × 10-3 mbar and above are found to remove open volume defects associated with the ITO/GaN interface. The study suggests that, irrespective of growth temperature and oxygen partial pressure, there is only one type of defect in the ITO responsible for trapping positrons, which we tentatively attribute to the oxygen vacancy.

  2. Tin doping in spray pyrolysed indium sulfide thin films for solar cell applications

    SciTech Connect

    Mathew, Meril; Gopinath, Manju; Kartha, C. Sudha; P.Vijayakumar, K.; Kashiwaba, Y.; Abe, T.

    2010-06-15

    This paper presents studies carried out on tin-doped indium sulfide films prepared using Chemical Spray Pyrolysis (CSP) technique. Effect of both in-situ and ex-situ doping were analyzed. Ex-situ doping was done by thermal diffusion, which was realized by annealing Sn/In{sub 2}S{sub 3} bilayer films. In-situ doping was accomplished by introducing Sn into the spray solution by using SnCl{sub 4}.5H{sub 2}O. Interestingly, it was noted that by ex-situ doping, conductivity of the sample enhanced considerably without affecting any of the physical properties such as crystallinity or band gap. Analysis also showed that higher percentage of doping resulted in samples with low crystallinity and negative photosensitivity. In-situ doping resulted in amorphous films. In contrast to ex-situ doping, 'in- situ doping' resulted in widening of optical band gap through oxygen incorporation; also it gave highly photosensitive films. (author)

  3. Rapid Fabrication of Low-Density Porous Tin Monolith via Hydrogen Bulb Dynamics Templates

    NASA Astrophysics Data System (ADS)

    Ren, Hongbo; Zhu, Jiayi; Bi, Yutie; Xu, Yewei; Zhang, Lin; Wang, Ni

    Low-density porous tin monolith with the pteridophyta leaf-like structure was fast fabricated by a facile route via the electrochemical deposition process via hydrogen bulb dynamics templates within less than 1min. The samples were characterized by scanning electron microscope, X-ray diffraction and so on. The results indicated that the deposited tin porous structure could be easily controlled to form film or monolith by adjusting the tin precursor concentration and surfactant content.

  4. Characterization of ZnO:SnO{sub 2} (50:50) thin film deposited by RF magnetron sputtering technique

    SciTech Connect

    Cynthia, S. R.; Sanjeeviraja, C.; Ponmudi, S.; Sivakumar, R.

    2016-05-06

    Zinc oxide (ZnO) and tin oxide (SnO{sub 2}) thin films have attracted significant interest recently for use in optoelectronic application such as solar cells, flat panel displays, photonic devices, laser diodes and gas sensors because of their desirable electrical and optical properties and wide band gap. In the present study, thin films of ZnO:SnO{sub 2} (50:50) were deposited on pre-cleaned microscopic glass substrate by RF magnetron sputtering technique. The substrate temperature and RF power induced changes in structural, surface morphological, compositional and optical properties of the films have been studied.

  5. Impact of soft annealing on the performance of solution-processed amorphous zinc tin oxide thin-film transistors.

    PubMed

    Nayak, Pradipta K; Hedhili, Mohamed N; Cha, Dongkyu; Alshareef, H N

    2013-05-01

    It is demonstrated that soft annealing duration strongly affects the performance of solution-processed amorphous zinc tin oxide thin-film transistors. Prolonged soft annealing times are found to induce two important changes in the device: (i) a decrease in zinc tin oxide film thickness, and (ii) an increase in oxygen vacancy concentration. The devices prepared without soft annealing exhibited inferior transistor performances, in comparison to devices in which the active channel layer (zinc tin oxide) was subjected to soft annealing. The highest saturation field-effect mobility-5.6 cm(2) V(-1) s(-1) with a drain-to-source on-off current ratio (Ion/Ioff) of 2 × 10(8)-was achieved in the case of devices with 10-min soft-annealed zinc tin oxide thin films as the channel layer. The findings of this work identify soft annealing as a critical parameter for the processing of chemically derived thin-film transistors, and it correlates device performance to the changes in material structure induced by soft annealing.

  6. Synthesis of TiN thin film on diamond surface for ferrous metal contacts by a new atom beam method

    NASA Astrophysics Data System (ADS)

    Kinoshita, Hiroshi; Yamamoto, Shunsuke; Yatani, Hideaki; Nakai, Tetsuo; Ohmae, Nobuo

    2012-01-01

    In order to prevent degradation of diamond surfaces in contact with ferrous metals, a TiN thin film of a few tens of nm thick was synthesized on a diamond surface with a Ti thin buffer layer of approximately 10 nm by a new atom beam method. A diamond surface was simultaneously exposed to pulsed Ti arc plasma and hyperthermal neutral N atom beam generated from an arc plasma gun (APG) and a laser breakdown-type atom beam generator, respectively. Frictional experiment of the TiN thin film was conducted by an in situ scanning electron microscopic (SEM) tribometer using a 1 mm diameter SUS304 pin with an applied force of 0.24 N. The TiN film had a relative high friction coefficient (0.4), but this film showed no notable degradation and relative steady friction. In addition, a TiN coated diamond tip by the new atom beam method showed less wear than that of non-coated diamond tips by three times in the scratching tests of iron with using an atomic force microscope (AFM).

  7. High quality ZnO:Al transparent conducting oxide films synthesized by pulsed filtered cathodic arc deposition

    SciTech Connect

    Anders, Andre; Lim, Sunnie H.N.; Yu, Kin Man; Andersson, Joakim; Rosen, Johanna; McFarland, Mike; Brown, Jeff

    2009-04-24

    Aluminum-doped zinc oxide, ZnO:Al or AZO, is a well-known n-type transparent conducting oxide with great potential in a number of applications currently dominated by indium tin oxide (ITO). In this study, the optical and electrical properties of AZO thin films deposited on glass and silicon by pulsed filtered cathodic arc deposition are systematically studied. In contrast to magnetron sputtering, this technique does not produce energetic negative ions, and therefore ion damage can be minimized. The quality of the AZO films strongly depends on the growth temperature while only marginal improvements are obtained with post-deposition annealing. The best films, grown at a temperature of about 200?C, have resistivities in the low to mid 10-4 Omega cm range with a transmittance better than 85percent in the visible part of the spectrum. It is remarkable that relatively good films of small thickness (60 nm) can be fabricated using this method.

  8. Deposition of conductive TiN shells on SiO2 nanoparticles with a fluidized bed ALD reactor

    NASA Astrophysics Data System (ADS)

    Didden, Arjen; Hillebrand, Philipp; Wollgarten, Markus; Dam, Bernard; van de Krol, Roel

    2016-02-01

    Conductive TiN shells have been deposited on SiO2 nanoparticles (10-20 nm primary particle size) with fluidized bed atomic layer deposition using TDMAT and NH3 as precursors. Analysis of the powders confirms that shell growth saturates at approximately 0.4 nm/cycle at TDMAT doses of >1.2 mmol/g of powder. TEM and XPS analysis showed that all particles were coated with homogeneous shells containing titanium. Due to the large specific surface area of the nanoparticles, the TiN shells rapidly oxidize upon exposure to air. Electrical measurements show that the partially oxidized shells are conducting, with apparent resistivity of approximately 11 kΩ cm. The resistivity of the powders is strongly influenced by the NH3 dose, with a smaller dose giving an order-of-magnitude higher resistivity.

  9. Deposition of superhard amorphous carbon films by pulsed arc sources

    SciTech Connect

    Scheibe, H.J.; Schultrich, B.; Ziegele, H.; Siemroth, P.

    1996-12-31

    Hydrogen-free amorphous carbon films with hardness comparable to crystalline superhard materials have been deposited by special Pulsed arc techniques. By the combination of very high hardness, low adhesion and high smoothness, these films show superior behaviour in wear and glide applications. The influence of plasma and deposition conditions on these film properties and the choice of optimum conditions are discussed.

  10. Hybrid films with graphene oxide and metal nanoparticles could now replace indium tin oxide.

    PubMed

    Varela-Rizo, Helena; Martín-Gullón, Ignacio; Terrones, Mauricio

    2012-06-26

    Graphene oxide (G-O), a highly oxidized sheet of sp(2)-hybridized carbon with insulating electrical properties, can be transformed into graphene if it is adequately reduced. In the past, researchers believed that reduced G-O (rG-O) could be highly conducting, but it has been shown that the presence of extended vacancies and defects within rG-O negatively affect its electrical transport. Although these observations indicated that rG-O could not be used in the fabrication of any electronic device, in this issue of ACS Nano, Ruoff's group demonstrates that rG-O can indeed be used for producing efficient transparent conducting films (TCFs) if the rG-O material is coupled with Au nanoparticles (Au-NPs) and Ag nanowires (Ag-NWs). The work further demonstrates that these hybrid films containing zero-dimensional (Au-NPs), one-dimensional (Ag-NWs), and two-dimensional (rG-O) elements exhibit high optical transmittance (e.g., 90%) and low sheet resistance (20-30 Ω/□), with values comparable to those of indium tin oxide (ITO) films. In addition, Ruoff's group notes that the presence of Ag-NWs and rG-O in the films showed antibacterial properties, thus demonstrating that it is now possible to produce flexible TCFs with bactericidal functions. The data show that smart hybrid films containing rG-O and different types of NPs and NWs could be synthesized easily and could result in smart films with unprecedented functions and applications.

  11. Pulsed-laser deposition of crystalline Teflon (PTFE) films

    NASA Astrophysics Data System (ADS)

    Li, S. T.; Arenholz, E.; Heitz, J.; Bäuerle, D.

    1998-01-01

    Thin films of crystalline polytetrafluoroethylene (PTFE) were prepared by pulsed-laser deposition using 248 nm UV-excimer-laser radiation. Pressed powder pellets and bulk PTFE have been employed as target material. The films were analyzed by means of optical polarization microscopy, stylus profilometry, capacity measurements, XRD, and IR spectroscopy. The effect of substrate temperature Ts on the morphology and crystallinity of the films was studied. Films deposited from pressed powder targets at sufficiently high Ts consist mainly of spherulite-like microcrystallites. These films are continuous, pinhole-free, well adherent to the substrate, and have a composition which is similar to that of the target material. It is suggested that film formation is based on laser-assisted material transfer with subsequent melting and crystallization. They are superior to films deposited from PTFE bulk targets, cut from a solid rod, with respect to film morphology, deposition rate, film cohesion, and optical and electrical properties.

  12. Sputter-deposited TiN electrode coatings for superior sensing and pacing performance.

    PubMed

    Schaldach, M; Hubmann, M; Weikl, A; Hardt, R

    1990-12-01

    The sensing and pacing performance of pacemaker electrodes is characterized by the electrochemical properties of the electrode/tissue interface affecting tissue reactions and the kinetics of the ionic exchange. The usually smooth metallic electrode surface results in a high pass filter characteristic. To better match the electrode's filter characteristic to the spectral content of the depolarization signal, various combinations of electrode shape, material and surface structure have been researched. The electrode with sputter-deposited TiN coating presented in this report has been designed to meet the demand for low acute as well as chronic thresholds and superior sensing performance not only with respect to spontaneous activity but also regarding the detection of the evoked response. The clinical results obtained with this electrode prove the excellent pacing and sensing properties resulting from minimized polarization losses and optimized filtering of the signal to be detected, respectively. The acute and chronic clinical advantages over previous concepts are attributed mainly to the biocompatibility of the material used and the microcrystalline surface structure achieved by the coating process. The design concept of the new electrode is presented together with the clinical results obtained. While the advancements in microelectronics and battery technology have certainly formed the basis for the development of pulse generators featuring an ever increasing versatility of functions at the same or even smaller pacemaker dimensions, from a point of view of pacing system performance the development of improved electrode concepts as the one presented must be regarded as equally indispensable.

  13. Fabrication of Transparent p-Type CuxZnyS Thin Films by the Electrochemical Deposition Method

    NASA Astrophysics Data System (ADS)

    Yang, Kai; Ichimura, Masaya

    2011-04-01

    CuxZnyS thin films were deposited on indium-tin oxide-coated glass substrates by the electrochemical deposition (ECD) method using aqueous solutions containing CuSO4, ZnSO4, and Na2S2O3. The film deposited under optimum conditions exhibited a high optical transmission, and its energy band gap was about 3.2 eV. It was confirmed that CuxZnyS showed p-type conduction and photosensitivity. To fabricate a ZnO/CuxZnyS heterojunction, an n-type ZnO thin film was deposited on CuxZnyS by ECD. In a current-voltage measurement, the heterojunction showed rectification properties.

  14. Role of the buffer solution in the chemical deposition of CdS films for CIGS solar cell applications

    NASA Astrophysics Data System (ADS)

    Lee, Sooho; Kim, Donguk; Baek, Dohyun; Hong, Byoungyou; Yi, Junsin; Lee, Jaehyeong; Park, Yong Seob; Choi, Wonseok

    2014-05-01

    In this work, the effects of NH4Ac on the structural and the electro-optical properties of CdS films were investigated. CdS thin films were deposited on soda-lime glass and indium-tin-oxide (ITO) coated glass from a chemical bath containing 0.025 M cadmium acetate, 0 M ~ 0.2 M ammonium acetate, 0.5 M thiourea, and ammonia. Cadmium acetate was the cadmium source, ammonium acetate served as a buffer, ammonia was the complexing agent, and thiourea was the source of sulfur. A commonl- available chemical bath deposition system was successfully modified to obtain precise control over the pH of the solution at 75 °C during the deposition. Chemically deposited CdS films were studied by using field-emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), optical transmittance, and electrical resistivity measurements.

  15. Theoretical modeling of a self-referenced dual mode SPR sensor utilizing indium tin oxide film

    NASA Astrophysics Data System (ADS)

    Srivastava, Sachin K.; Verma, Roli; Gupta, Banshi D.

    2016-06-01

    A prism based dual mode SPR sensor was theoretically modeled to work as a self-referenced sensor in spectral interrogation scheme. Self-referenced sensing was achieved by sandwiching an indium tin oxide thin film in between the prism base and the metal layer. The proposed sensor possesses two plasmon modes similar to long and short range SPRs (LR- and SR-SPRs) and we have analogically used LRSPR and SRSPR for them. However, these modes do not possess usual long range character due to the losses introduced by the imaginary part of indium tin oxide (ITO) dielectric function. One of the two plasmon modes responds to change in analyte refractive index while the other remains fixed. The influence of various design parameters on the performance of the sensor was evaluated. The performance of the proposed sensor was compared, via control simulations, with established dual mode geometries utilizing silicon dioxide (SiO2), Teflon AF-1600 and Cytop. The design parameters of the established geometries were optimized to obtain self-referenced sensing operation. Trade-offs between the resonance spectral width, minimum reflectivity, shift in resonance wavelength and angle of incidence were examined for optimal design. The present study will be useful in the fabrication of self-referenced sensors where the ambient conditions are not quite stable.

  16. Physical properties of vacuum evaporated CdTe thin films with post-deposition thermal annealing

    NASA Astrophysics Data System (ADS)

    Chander, Subhash; Dhaka, M. S.

    2015-09-01

    This paper presents the physical properties of vacuum evaporated CdTe thin films with post-deposition thermal annealing. The thin films of thickness 500 nm were grown on glass and indium tin oxide (ITO) coated glass substrates employing thermal vacuum evaporation technique followed by post-deposition thermal annealing at temperature 450 °C. These films were subjected to the X-ray diffraction (XRD),UV-Vis spectrophotometer, source meter and atomic force microscopy (AFM) for structural, optical, electrical and surface morphological analysis respectively. The X-ray diffraction patterns reveal that the films have zinc-blende structure of single cubic phase with preferred orientation (111) and polycrystalline in nature. The crystallographic and optical parameters are calculated and discussed in brief. The optical band gap is found to be 1.62 eV and 1.52 eV for as-grown and annealed films respectively. The I-V characteristics show that the conductivity is decreased for annealed thin films. The AFM studies reveal that the surface roughness is observed to be increased for thermally annealed films.

  17. Crystallization kinetics of amorphous tin-doped indium oxide thin films

    NASA Astrophysics Data System (ADS)

    Ow-Yang, Cleva Wan

    The crystallization kinetics of amorphous tin-doped indium oxide thin films grown by dc magnetron sputtering and electron beam evaporation was investigated using time-resolved laser reflectivity in conjunction with TEM analyses. The as-grown films were established to be amorphous using glancing angle x-ray and selected area electron diffraction. The samples were then annealed at temperatures ranging from (˜111-167sp°C) some in a range of environments (oxidizing (Nsb2), strongly oxidizing (air), and reducing (wet/dry forming gas). Gross-sectional TEM analysis reveals a columnar as-sputtered microstructure that is retained after annealing to complete transformation. In contrast a-ITO films grown by evaporation show a uniformly dense microstructure. Annealing evaporated films in air produced films containing a wide distribution in grain sizes, while annealing in the more reducing environments yielded polycrystalline films with a narrow grain size distribution centered at 15 nm. Time-resolved laser reflectivity was an advantageous tool for monitoring the progress of the crystallization transformation because the technique generates quantifiable data while allowing real-time, non-contact observation. Plotting the transformation rate as a function of annealing temperature demonstrated the amorphous-to-crystalline transformation to be a thermally activated process. The energy required to crystallize sputtered a-ITO films in flowing Nsb2 is much lower than that for evaporated alpha-ITO films also in flowing Nsb2. XRD spectra of the as-sputtered a-ITO reveals the presence of an indium metal phase, which is not observed in the as-evaporated a-ITO films. The activation energy is most likely dependent on the presence of In metal, which serves as a catalyst for lowering the energy barrier. This is confirmed by the reduction in energy needed to transform evaporated a-ITO film in a reducing environment. In this study, the pre- and post-anneal microstructures were examined to

  18. Correlation of oxygen vacancies to various properties of amorphous zinc tin oxide films

    NASA Astrophysics Data System (ADS)

    Sung, Nark-Eon; Lee, Han-Koo; Chae, Keun Hwa; Singh, Jitendra Pal; Lee, Ik-Jae

    2017-08-01

    Amorphous ZnO-SnO2 (a-ZTO) films were deposited on quartz substrates at working pressures of 5 ≤ PW ≤ 12 mTorr using radio frequency sputtering. PW affected the occurrence of oxygen deficiencies in the films. X-ray photoemission spectroscopy, near edge X-ray absorption fine structure (NEXAFS), and ultraviolet photoelectron spectroscopy-based spectroscopy analyses showed that oxygen vacancies (OVs) influence the evolution of the optical and electrical properties of a-ZTO films. NEXAFS reflects the onset of OVs. Low PW contributes to the evolution of a chemical structure with numerous OVs. This result can be applied to improve the electro-optical properties of a-ZTO films. As PW decreased, the carrier concentration increased, carrier mobility increased, and film resistivity decreased. Average optical transmittance in the visible region was >90%, and increased as PW decreased.

  19. Ferroelectricity of nondoped thin HfO2 films in TiN/HfO2/TiN stacks

    NASA Astrophysics Data System (ADS)

    Nishimura, Tomonori; Xu, Lun; Shibayama, Shigehisa; Yajima, Takeaki; Migita, Shinji; Toriumi, Akira

    2016-08-01

    We report on the impact of TiN interfaces on the ferroelectricity of nondoped HfO2. Ferroelectric properties of nondoped HfO2 in TiN/HfO2/TiN stacks are shown in capacitance-voltage and polarization-voltage characteristics. The Curie temperature is also estimated to be around 500 °C. The ferroelectricity of nondoped HfO2 clearly appears by thinning HfO2 film down to ˜35 nm. We directly revealed in thermal treatments that the ferroelectric HfO2 film on TiN was maintained by covering the top surface of HfO2 with TiN, while it was followed by a phase transition to the paraelectric phase in the case of the open surface of HfO2. Thus, it is concluded that the ferroelectricity in nondoped HfO2 in this study was mainly driven by both of top and bottom TiN interfaces.

  20. Enhancement of physical properties of indium tin oxide deposited by super density arc plasma ion plating by O 2 plasma treatment

    NASA Astrophysics Data System (ADS)

    Kim, Soo Young; Hong, Kihyon; Lee, Jong-Lam; Choi, Kyu Han; Song, Kyu Ho; Ahn, Kyung Chul

    2008-01-01

    Indium tin oxide (ITO) films were deposited on glass by super density arc plasma ion plating (SDAP-IP) method. In X-ray diffraction profiles, no obvious changes were found after O 2 plasma treatment. The transmittance, roughness, X-ray diffraction pattern, and sheet resistance also negligibly changed with O 2 plasma treatment. However, the water contact angle decreased with the O 2 plasma treatment, suggesting the increase of cohesive force between SDAP-IP ITO and organic materials. Synchrotron radiation photoemission spectroscopy showed that O 2 plasma treatment resulted in an increase of SDAP-IP ITO work function. Incorporation of oxygen atoms near the SDAP-IP ITO surface during the O 2 plasma treatment induced a peroxidic ITO surface, increasing the work function.

  1. Heterotermetallic indium lithium halostannates: low-temperature single-source precursors for tin-rich indium tin oxides and their application for thin-film transistors.

    PubMed

    Samedov, Kerim; Aksu, Yilmaz; Driess, Matthias

    2012-06-18

    The syntheses and structural elucidation of dimeric [Sn(OCyHex)(2)] (1), its corresponding (cyclohexoxy)alkalistannates(II) [{M(OCyHex)(3)Sn}(2)] (M = Li (2), Na (3), K (4)), and of the first heteroleptic heterotermetallic Li/In/Sn-haloalkoxide clusters [X(2)In{LiSn(2)(OCyHex)(6)}] (X = Br (5), Cl (6)) with a double seco-norcubane core are reported. They represent suitable precursors for new amorphous indium tin oxide (ITO) materials as transparent conducting oxides with drastically reduced concentrations of expensive indium, while maintaining their high electrical performance. In fact, compounds 5 and 6 were successfully degraded under dry synthetic air at relatively low temperature, resulting in new semiconducting tin-rich ITOs homogeneously dispersed in a tin oxide/lithium oxide matrix. The obtained particles were investigated and characterised by different analytical techniques, such as powder XRD, IR spectroscopy, SEM, TEM and energy-dispersive X-ray spectroscopy (EDX). The analytical data confirm that the final materials consist of tin-containing indium oxide embedded in an amorphous tin oxide matrix. The typical broadening and shift of the observed indium oxide reflections to higher 2θ values in the powder XRD pattern clearly indicated that tin centres were successfully incorporated into the In(2)O(3) lattice and partially occupied In(3+) sites. Investigations by EDX mapping proved that Sn was homogeneously distributed in the final materials. Thin-film field-effect transistors (FETs) were fabricated by spin-coating of silicon wafers with solutions of 5 in toluene and subsequent calcination under dry air (25-700 °C). The FETs prepared with precursor 5 exhibited excellent performances, as shown by a charge-carrier mobility of 6.36×10(-1)  cm(2)  V(-1)  s (calcination at 250 °C) and an on/off current ratio of 10(6). Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  2. Electro-deposition of superconductor oxide films

    DOEpatents

    Bhattacharya, Raghu N.

    2001-01-01

    Methods for preparing high quality superconducting oxide precursors which are well suited for further oxidation and annealing to form superconducting oxide films. The method comprises forming a multilayered superconducting precursor on a substrate by providing an electrodeposition bath comprising an electrolyte medium and a substrate electrode, and providing to the bath a plurality of precursor metal salts which are capable of exhibiting superconducting properties upon subsequent treatment. The superconducting precursor is then formed by electrodepositing a first electrodeposited (ED) layer onto the substrate electrode, followed by depositing a layer of silver onto the first electrodeposited (ED) layer, and then electrodepositing a second electrodeposited (ED) layer onto the Ag layer. The multilayered superconducting precursor is suitable for oxidation at a sufficient annealing temperature in air or an oxygen-containing atmosphere to form a crystalline superconducting oxide film.

  3. Improved Stability Of Amorphous Zinc Tin Oxide Thin Film Transistors Using Molecular Passivation

    SciTech Connect

    Rajachidambaram, Meena Suhanya; Pandey, Archana; Vilayur Ganapathy, Subramanian; Nachimuthu, Ponnusamy; Thevuthasan, Suntharampillai; Herman, Gregory S.

    2013-10-21

    The role of back channel surface chemistry on amorphous zinc tin oxide (ZTO) bottom gate thin film transistors (TFT) have been characterized by positive bias-stress measurements and x-ray photoelectron spectroscopy. Positive bias-stress turn-on voltage shifts for ZTO-TFTs were significantly reduced by passivation of back channel surfaces with self-assembled monolayers of n-hexylphosphonic acid (n-HPA) when compared to ZTO-TFTs with no passivation. These results indicate that adsorption of molecular species on exposed back channel of ZTO-TFTs strongly influence observed turn-on voltage shifts, as opposed to charge injection into the dielectric or trapping due to oxygen vacancies.

  4. Laser Direct Ablation of Indium Tin Oxide Films on Both Sides of Various Substrates.

    PubMed

    Oh, Gi Taek; Kwon, Sang Jik; Han, Jae-Hee; Cho, Eou Sik

    2015-03-01

    We demonstrate ablation of indium tin oxide (ITO) films onto both glass and polyethylene terephthalate (PET) substrates, using a Q-switched diode-pumped neodymium-doped yttrium vanadate laser (Nd:YVO4, λ = 1064 nm) incident on both the front and back sides of the substrate. From scanning electron microscope (SEM) images and depth profile data, ITO patterns that were laser-ablated onto glass from the back side showed a larger abrupt change in the ablated line width than those ablated from the front. However, there were only slight differences in ablated line widths due to the direction of the incident laser beam. We provide a possible explanation in terms of several factors: dispersion of laser beam energy through the substrate, overlapping of each laser beam spot due to scanning speed, and the thickness of glass and PET substrates.

  5. Electrophoretically-deposited solid film lubricants

    SciTech Connect

    Dugger, M.T.; Panitz, J.K.J.; Vanecek, C.W.

    1995-04-01

    An aqueous-based process that uses electrophoresis to attract powdered lubricant in suspension to a charged target was developed. The deposition process yields coatings with low friction, complies with environmental safety regulations, requires minimal equipment, and has several advantages over processes involving organic binders or vacuum techniques. This work focuses on development of the deposition process, includes an analysis of the friction coefficient of the material in sliding contact with stainless steel under a range of conditions, and a functional evaluation of coating performance in a precision mechanical device application. Results show that solid lubricant films with friction coefficients as low as 0.03 can be produced. A 0.03 friction coefficient is superior to solid lubricants with binder systems and is comparable to friction coefficients generated with more costly vacuum techniques.

  6. THz behavior of indium-tin-oxide films on p-Si substrates

    SciTech Connect

    Brown, E. R. Zhang, W-D.; Chen, H.; Mearini, G. T.

    2015-08-31

    This paper reports broadband THz free-space transmission measurements and modeling of indium-tin-oxide (ITO) thin films on p-doped Si substrates. Two such samples having ITO thickness of 50 and 100 nm, and DC sheet conductance 260 and 56 Ω/sq, respectively, were characterized between 0.2 and 1.2 THz using a frequency-domain spectrometer. The 50-nm-film sample displayed very flat transmittance over the 1-THz bandwidth, suggesting it is close to the critical THz sheet conductance that suppresses multi-pass interference in the substrate. An accurate transmission-line-based equivalent circuit is developed to explain the effect, and then used to show that the net reflectivity and absorptivity necessarily oscillate with frequency. This has important implications for the use of thin-film metallic coupling layers on THz components and devices, such as detectors and sources. Consistent with previous reported results, the sheet conductance that best fits the THz transmittance data is roughly 50% higher than the DC values for both samples.

  7. Sensitivity and Response of Polyvinyl Alcohol/Tin Oxide Nanocomposite Multilayer Thin Film Sensors.

    PubMed

    Sriram, G; Dhineshbabu, N R; Nithyavathy, N; Saminathan, K; Kaler, K V I S; Rajendran, V

    2016-01-01

    Nanocrystalline Tin Oxide (SnO₂) is Non-Stoichiometric in Nature with Functional Properties Suitable for gas sensing. In this study, SnO₂nanoparticles were prepared by the sol-gel technique, which were then characterised using X-ray diffraction. The nanoparticles showed tetragonal structure with an average crystallite size of 18 nm. The stretching and vibration modes of SnO₂were confirmed using Fourier transform infrared spectroscopy. The size of SnO₂ nanoparticles was determined using particle size analyser, which was found be 60 ± 10 nm on average. The surface morphology of the nanoparticles was investigated using scanning electron microscope, which showed irregular-sized agglomerated SnO₂nanostructures. In addition, primary particle size was evaluated using high-resolution transmission electron microscopy, which was found to be 50 nm on average. The polyvinyl alcohol/SnO₂ composite thin film was prepared on a glass substrate using spin-coating method. The values of band gap energy and electrical conductance of 13-layer thin film were found to be 2.96 eV and 0.0505 mho, respectively. Sulfur dioxide (SO₂) was suitably tailored to verify the sensor response over a concentration range of 10-70 ppm at room temperature. The performance, response, and recovery time of sensors were increased by increasing the layers of the thin film.

  8. Selective mechanical transfer deposition of Langmuir graphene films for high-performance silver nanowire hybrid electrodes.

    PubMed

    Large, Matthew; Ogilvie, Sean Paul; Alomairy, Sultan; Vöckerodt, Terence; Myles, David; Cann, Maria; Chan, Helios; Jurewicz, Izabela; King, Alice; Dalton, Alan B

    2017-09-29

    In this work we present silver nanowire hybrid electrodes, prepared through the addition of small quantities of pristine graphene by mechanical transfer deposition from surface-assembled Langmuir films. This technique is a fast, efficient, and facile method for modifying the opto-electronic performance of AgNW films. We demonstrate that it is possible to use this technique to perform two-step device production by selective patterning of the stamp used, leading to controlled variation in the local sheet resistance across a device. This is particularly attractive for producing extremely low-cost sensors on arbitrarily large scales. Our aim is to address some of the concerns surrounding the use of AgNW films as replacements for indium tin oxide (ITO); namely the use of scarce materials and poor stability of AgNWs against flexural and environmental degradation.

  9. The influence of Atomic Oxygen on the Figure of Merit of Indium Tin Oxide thin Films grown by reactive Dual Ion Beam Sputtering

    NASA Astrophysics Data System (ADS)

    Geerts, Wilhelmus; Simpson, Nelson; Woodall, Allen; Compton, Maclyn

    2014-03-01

    Indium Tin Oxide (ITO) is a transparent conducting oxide that is used in flat panel displays and optoelectronics. Highly conductive and transparent ITO films are normally produced by heating the substrate to 300 Celsius during deposition excluding plastics to be used as a substrate material. We investigated whether high quality ITO films can be sputtered at room temperature using atomic instead of molecular oxygen. The films were deposited by dual ion beam sputtering (DIBS). During deposition the substrate was exposed to a molecular or an atomic oxygen flux. Microscope glass slides and silicon wafers were used as substrates. A 29 nm thick SIO2 buffer layer was used. Optical properties were measured with a M2000 Woollam variable angle spectroscopic ellipsometer. Electrical properties were measured by linear four point probe using a Jandel 4pp setup employing silicon carbide electrodes, high input resistance, and Keithley low bias current buffer amplifiers. The figure of merit (FOM), i.e. the ratio of the conductivity and the average optical absorption coefficient (400-800 nm), was calculated from the optical and electric properties and appeared to be 1.2 to 5 times higher for the samples sputtered with atomic oxygen. The largest value obtained for the FOM was 0.08 reciprocal Ohms. The authors would like to thank the Research Corporation for Financial Support.

  10. A study on linear and non-linear optical constants of Rhodamine B thin film deposited on FTO glass

    NASA Astrophysics Data System (ADS)

    Yahia, I. S.; Jilani, Asim; Abutalib, M. M.; AlFaify, S.; Shkir, M.; Abdel-wahab, M. Sh.; Al-Ghamdi, Attieh A.; El-Naggar, A. M.

    2016-06-01

    The aim of this research was to fabricate/deposit the good quality thin film of Rhodamine B dye on fluorine doped tin oxide glass substrate by the low cost spin coating technique and study their linear and nonlinear optical parameters. The thickness of the thin film was measured about 300 nm with alpha step system. The transmittance of the fabricated thin film was found to be above 75% corresponding to the fluorine doped tin oxide layer. The structural analysis was performed with X-rays diffraction spectroscopy. Atomic force microscope showed the topographic image of deposited thin film. Linear optical constant like absorption coefficient, band gap, and extinction index was calculated. The dielectric constant was calculated to know the optical response of Rhodamine B dye over fluorine doped tin oxide substrate. The nonlinear optical constant like linear optical susceptibility χ(1), nonlinear optical susceptibility χ(3), nonlinear refractive index (n2) were calculated by spectroscopic method. This method has advantage over the experimental method like Z-Scan for organic dye base semiconductors for future advance optoelectronics applications like dye synthesis solar cell.

  11. Preparation of Thick Magnet Films by the Aerosol Deposition Method

    NASA Astrophysics Data System (ADS)

    Sugimoto, Satoshi

    The aerosol deposition method (ADM) is effective for the preparation of thick films with high deposition rate. We applied this method to fabricate NiZn ferrite or Sm-Fe-N films, which are used for microwave absorbers or permanent magnets, respectively. In this article, the magnetic properties of Sm-Fe-N thick films fabricated by the ADM are introduced and the possibility of the ADM for the fabrication process with high deposition rate is discussed.

  12. Morphology of TiN thin films grown on MgO(001) by reactive dc magnetron sputtering

    SciTech Connect

    Ingason, A. S.; Magnus, F.; Olafsson, S.; Gudmundsson, J. T.

    2010-07-15

    Thin TiN films were grown by reactive dc magnetron sputtering on single-crystalline MgO(001) substrates at a range of temperatures from room temperature to 600 deg. C. Structural characterization was carried out using x-ray diffraction and reflection methods. TiN films grow epitaxially on the MgO substrates at growth temperatures of 200 deg. C and above. The crystal coherence length determined from Laue oscillations and the Scherrer method agrees with x-ray reflection thickness measurements to 6% and within 3% for growth temperatures of 200 and 600 deg. C, respectively. For lower growth temperatures the films are polycrystalline but highly textured and porous.

  13. Effects of complexing agents on electrochemical deposition of FeS x O y thin films

    NASA Astrophysics Data System (ADS)

    Supee, Aizuddin; Ichimura, Masaya

    2016-08-01

    FeS x O y thin films were deposited on indium-tin-oxide (ITO)-coated glass substrates at 15 °C via galvanostatic electrochemical deposition from an aqueous solution containing 100 mM Na2S2O3 and 30 mM FeSO4. The effects of l(+)-tartaric acid (C4H4O6) and lactic acid [CH3CH(OH)COOH] at different concentrations were investigated. All the deposited films were amorphous. With the complexing agents, the thickness was increased, and the oxygen content was reduced significantly compared with the sample deposited without the complexing agents. In the photoelectrochemical measurement, p-type conductivity was confirmed. The photoresponsivity was not influenced significantly by the complexing agent, suggesting that the oxygen content does not drastically affect the properties of the deposited films probably because the local bonding configuration around Fe atoms in FeS x O y is similar to that in FeS2.

  14. Recent progress of obliquely deposited thin films for industrial applications

    NASA Astrophysics Data System (ADS)

    Suzuki, Motofumi; Itoh, Tadayoshi; Taga, Yasunori

    1999-06-01

    More than 10 years ago, birefringent films of metal oxides were formed by oblique vapor deposition and investigated with a view of their application to optical retardation plates. The retardation function of the films was explained in terms of the birefringence caused by the characteristic anisotropic nanostructure inside the films. These films are now classified in the genre of the so-called sculptured thin films. However, the birefringent films thus prepared are not yet industrialized even now due to the crucial lack of the durability and the yield of products. In this review paper, we describe the present status of application process of the retardation films to the information systems such as compact disc and digital versatile disc devices with a special emphasis on the uniformity of retardation properties in a large area and the stability of the optical properties of the obliquely deposited thin films. Finally, further challenges for wide application of the obliquely deposited thin films are also discussed.

  15. Fabrication of Piezoelectric Polyurea Films by Alternating Deposition

    NASA Astrophysics Data System (ADS)

    Yanase, Takashi; Hasegawa, Tetsuya; Nagahama, Taro; Shimada, Toshihiro

    2012-04-01

    We demonstrate that polyurea films can be prepared by alternating deposition with automated deposition control involving quartz crystal microbalance monitoring and optical source heating. The thickness of the films was linearly controlled by changing the repetition time of deposition, and the stoichiometry obtained was much higher than ±5%. The surface roughness of a 600-nm-thick film was 0.5 nm, which ensures the nm thickness control of the deposited polymers. The piezoelectricity of the films was confirmed by directly measuring the current transient induced by mechanical stress and by measuring the capacitance change induced by electric field.

  16. Real-Time Deposition Monitor for Ultrathin Conductive Films

    NASA Technical Reports Server (NTRS)

    Hines, Jacqueline

    2011-01-01

    A device has been developed that can be used for the real-time monitoring of ultrathin (2 or more) conductive films. The device responds in less than two microseconds, and can be used to monitor film depositions up to about 60 thick. Actual thickness monitoring capability will vary based on properties of the film being deposited. This is a single-use device, which, due to the very low device cost, can be disposable. Conventional quartz/crystal microbalance devices have proven inadequate to monitor the thickness of Pd films during deposition of ultrathin films for hydrogen sensor devices. When the deposited film is less than 100 , the QCM measurements are inadequate to allow monitoring of the ultrathin films being developed. Thus, an improved, high-sensitivity, real-time deposition monitor was needed to continue Pd film deposition development. The new deposition monitor utilizes a surface acoustic wave (SAW) device in a differential delay-line configuration to produce both a reference response and a response for the portion of the device on which the film is being deposited. Both responses are monitored simultaneously during deposition. The reference response remains unchanged, while the attenuation of the sensing path (where the film is being deposited) varies as the film thickness increases. This device utilizes the fact that on high-coupling piezoelectric substrates, the attenuation of an SAW undergoes a transition from low to very high, and back to low as the conductivity of a film on the device surface goes from nonconductive to highly conductive. Thus, the sensing path response starts with a low insertion loss, and as a conductive film is deposited, the film conductivity increases, causing the device insertion loss to increase dramatically (by up to 80 dB or more), and then with continued film thickness increases (and the corresponding conductivity increases), the device insertion loss goes back down to the low level at which it started. This provides a

  17. Enhanced Photocatalytic Performance Depending on Morphology of Bismuth Vanadate Thin Film Synthesized by Pulsed Laser Deposition.

    PubMed

    Jeong, Sang Yun; Choi, Kyoung Soon; Shin, Hye-Min; Kim, Taemin Ludvic; Song, Jaesun; Yoon, Sejun; Jang, Ho Won; Yoon, Myung-Han; Jeon, Cheolho; Lee, Jouhahn; Lee, Sanghan

    2017-01-11

    We have fabricated high quality bismuth vanadate (BiVO4) polycrystalline thin films as photoanodes by pulsed laser deposition (PLD) without a postannealing process. The structure of the grown films is the photocatalytically active phase of scheelite-monoclinic BiVO4 which was obtained by X-ray diffraction (XRD) analysis. The change of surface morphology for the BIVO4 thin films depending on growth temperature during synthesis has been observed by scanning electron microscopy (SEM), and its influence on water splitting performance was investigated. The current density of the BiVO4 film grown on a glass substrate covered with fluorine-doped tin oxide (FTO) at 230 °C was as high as 3.0 mA/cm(2) at 1.23 V versus the potential of the reversible hydrogen electrode (VRHE) under AM 1.5G illumination, which is the highest value so far in previously reported BiVO4 films grown by physical vapor deposition (PVD) methods. We expect that doping of transition metal or decoration of oxygen evolution catalyst (OEC) in our BiVO4 film might further enhance the performance.

  18. Chemical vapor deposition of copper films

    NASA Astrophysics Data System (ADS)

    Borgharkar, Narendra Shamkant

    We have studied the kinetics of copper chemical vapor deposition (CVD) for interconnect metallization using hydrogen (Hsb2) reduction of the Cu(hfac)sb2 (copper(II) hexafluoroacetylacetonate) precursor. Steady-state deposition rates were measured using a hot-wall microbalance reactor. For base case conditions of 2 Torr Cu(hfac)sb2, 40 Torr Hsb2, and 300sp°C, a growth rate of 0.5 mg cmsp{-2} hrsp{-1} (ca. 10 nm minsp{-1}) is observed. Reaction order experiments suggest that the deposition rate passes through a maximum at partial pressure of 2 Torr of Cu(hfac)sb2. The deposition rate has an overall half-order dependence on Hsb2 partial pressure. A Langmuir-Hinshelwood rate expression is used to describe the observed kinetic dependencies on Cu(hfac)sb2, Hsb2, and H(hfac). Based on the rate expression a mechanism is proposed in which the overall rate is determined by the surface reaction of adsorbed Cu(hfac)sb2 and H species. Additionally, the role of alcohols in enhancing the deposition rate has been investigated. Addition of isopropanol results in a six fold enhancement to yield a deposition rate of 3.3 mg cmsp{-2} hrsp{-1} (ca. 60 nm minsp{-1}) at 5 Torr of isopropanol, 0.4 Torr Cu(hfac)sb2, 40 Torr Hsb2, and 300sp°C. Ethanol and methanol give lower enhancements of 1.75 and 1.1 mg cmsp{-2} hrsp{-1}, respectively. A mechanism based on the ordering of the aqueous pKsba values of the alcohols is proposed to explain the observed results. Lastly, we have built a warm-wall Pedestal reactor apparatus to demonstrate copper CVD on TiN/Si substrates. The apparatus includes a liquid injection system for transport of isopropanol-diluted precursor solutions. At optimized conditions of precursor and substrate pre-treatments, we have deposited uniform films of copper on TiN/Si substrates at an average deposition rate of 3.0 mg cmsp{-2} hrsp{-1} (ca. 60 nm minsp{-1}).

  19. Characterization of Amorphous Zinc Tin Oxide Semiconductors

    SciTech Connect

    Rajachidambaram, Jaana Saranya; Sanghavi, Shail P.; Nachimuthu, Ponnusamy; Shutthanandan, V.; Varga, Tamas; Flynn, Brendan T.; Thevuthasan, Suntharampillai; Herman, Gregory S.

    2012-06-12

    Amorphous zinc tin oxide (ZTO) was investigated to determine the effect of deposition and post annealing conditions on film structure, composition, surface contamination, and thin film transistor (TFT) device performance. X-ray diffraction results indicated that the ZTO films remain amorphous even after annealing to 600 °C. We found that the bulk Zn:Sn ratio of the sputter deposited films were slightly tin rich compared to the composition of the ceramic sputter target, and there was a significant depletion of zinc at the surface. X-ray photoelectron spectroscopy also indicated that residual surface contamination depended strongly on the sample post-annealing conditions where water, carbonate and hydroxyl species were absorbed to the surface. Electrical characterization of ZTO films, using TFT test structures, indicated that mobilities as high as 17 cm2/Vs could be obtained for depletion mode devices.

  20. Photochemical etching during ultraviolet photolytic deposition of metal films on semiconductor surfaces

    NASA Astrophysics Data System (ADS)

    Kowalczyk, Steven P.; Miller, D. L.

    1986-01-01

    UV photochemical deposition of Sn films on GaAs (001) surfaces from a variety of tin-containing compounds (tetramethyltin, tetrabutyltin, dibutyltin dibromide, stannic chloride, hexamethylditin, dibutyltin sulfide, and iodotrimethyltin) was studied. X-ray photoelectron spectroscopy showed that during the initial stages of deposition from the halogenated compounds, the GaAs surface was photochemically etched, most likely by a halogen radical species. The photochemical etching resulted in an arsenic deficient surface which was particularly dramatic for the case of SnCl4. These results have important implications for the choice of sources for photochemical deposition when the metal-semiconductor interface is important and for photochemical etching if stoichiometric surfaces are required.

  1. The Influence of Plasma Nitriding Pre-Treatment on Tribological Properties of TiN Coatings Deposited by PACVD

    NASA Astrophysics Data System (ADS)

    Mahdipoor, M. S.; Mahboubi, F.; Ahangarani, Sh.; Raoufi, M.; Elmkhah, H.

    2012-06-01

    The aim of this study is to investigate the effect of plasma nitriding pre-treatment (PN) on mechanical and tribological behavior of TiN coatings produced by plasma-assisted chemical vapor deposition (PACVD). The heat treatment of quench and temper was carried out on hot work AISI H11 (DIN 1.2343) steel samples. A group of samples were plasma nitrided at 500 °C for 4 h in an atmosphere containing 25 vol.% nitrogen and 75 vol.% hydrogen. Then TiN layer was deposited on all of samples at 520 °C temperature, 8 kHz frequency, and 33% duty cycle. The microstructural, mechanical, and tribological properties of the coatings were investigated using SEM, WDS, AFM, microhardness tester, and pin-on-disc wear test. The load of wear test was 10 N and the samples were worn against different pins, ball-bearing steel (DIN 1.3505), and cemented tungsten carbide (WC-Co). The results indicate that the difference of hardness between the samples with PN-TiNlayer and those samples with only TiN layer without PN was 450 HV and the former samples showed a significant amount of wear resistance in comparison to the latter ones.

  2. Smooth e-beam-deposited tin-doped indium oxide for III-nitride vertical-cavity surface-emitting laser intracavity contacts

    NASA Astrophysics Data System (ADS)

    Leonard, J. T.; Cohen, D. A.; Yonkee, B. P.; Farrell, R. M.; DenBaars, S. P.; Speck, J. S.; Nakamura, S.

    2015-10-01

    We carried out a series of simulations analyzing the dependence of mirror reflectance, threshold current density, and differential efficiency on the scattering loss caused by the roughness of tin-doped indium oxide (ITO) intracavity contacts for 405 nm flip-chip III-nitride vertical-cavity surface-emitting lasers (VCSELs). From these results, we determined that the ITO root-mean-square (RMS) roughness should be <1 nm to minimize scattering losses in VCSELs. Motivated by this requirement, we investigated the surface morphology and optoelectronic properties of electron-beam (e-beam) evaporated ITO films, as a function of substrate temperature and oxygen flow and pressure. The transparency and conductivity were seen to increase with increasing temperature. Decreasing the oxygen flow and pressure resulted in an increase in the transparency and resistivity. Neither the temperature, nor oxygen flow and pressure series on single-layer ITO films resulted in highly transparent and conductive films with <1 nm RMS roughness. To achieve <1 nm RMS roughness with good optoelectronic properties, a multi-layer ITO film was developed, utilizing a two-step temperature scheme. The optimized multi-layer ITO films had an RMS roughness of <1 nm, along with a high transparency (˜90% at 405 nm) and low resistivity (˜2 × 10-4 Ω-cm). This multi-layer ITO e-beam deposition technique is expected to prevent p-GaN plasma damage, typically observed in sputtered ITO films on p-GaN, while simultaneously reducing the threshold current density and increasing the differential efficiency of III-nitride VCSELs.

  3. Fabrication of heterojunction solar cells by improved tin oxide deposition on insulating layer

    DOEpatents

    Feng, Tom; Ghosh, Amal K.

    1980-01-01

    Highly efficient tin oxide-silicon heterojunction solar cells are prepared by heating a silicon substrate, having an insulating layer thereon, to provide a substrate temperature in the range of about 300.degree. C. to about 400.degree. C. and thereafter spraying the so-heated substrate with a solution of tin tetrachloride in a organic ester boiling below about 250.degree. C. Preferably the insulating layer is naturally grown silicon oxide layer.

  4. Organic thin film deposition in atmospheric pressure glow discharge

    SciTech Connect

    Okazaki, S.; Kogoma, M.; Yokoyama, T.; Kodama, M.; Nomiyama, H.; Ichinohe, K.

    1996-01-01

    The stabilization of a homogeneous glow discharge at atmospheric pressure has been studied since 1987. On flat surfaces, various plasma surface treatments and film depositions at atmospheric pressure have been examined. A practical application of the atmospheric pressure glow plasma on inner surfaces of flexible polyvinyl chloride tubes was tested for thin film deposition of polytetrafluoroethylene. Deposited film surfaces were characterized by ESCA and FT-IR/ATR measurements. Also SEM observation was done for platelet adhesion on the plasma treated polyvinyl chloride surface. These results showed remarkable enhancement in the inhibition to platelet adhesion on the inner surface of PVC tube, and homogeneous organic film deposition was confirmed. The deposition mechanism of polytetrafluoroethylene film in atmospheric pressure glow plasma is the same as the mechanism of film formation in the low pressure glow plasma, except for radical formation source. {copyright} {ital 1996 American Institute of Physics.}

  5. Improved optical response and photocatalysis for N-doped titanium oxide (TiO 2) films prepared by oxidation of TiN

    NASA Astrophysics Data System (ADS)

    Wan, L.; Li, J. F.; Feng, J. Y.; Sun, W.; Mao, Z. Q.

    2007-03-01

    In order to improve the photocatalytic activity, N-doped titanium oxide (TiO 2) films were obtained by thermal oxidation of TiN films, which were prepared on Ti substrates by ion beam assisted deposition (IBAD). The dominating rutile TiO 2 phase was found in films after thermal oxidation. According to the results of X-ray photoelectron spectroscopy (XPS), the residual N atoms occupied O-atom sites in TiO 2 lattice to form Ti sbnd O sbnd N bonds. UV-vis spectra revealed the N-doped TiO 2 film had a red shift of absorption edge. The maximum red shift was assigned to the sample annealed at 750 °C, with an onset wavelength at 600 nm. The onset wavelength corresponded to the photon energy of 2.05 eV, which was nearly 1.0 eV below the band gap of pure rutile TiO 2. The effect of nitrogen was responsible for the enhancement of photoactivity of N-doped TiO 2 films in the range of visible light.

  6. Thin-film transistors with a channel composed of semiconducting metal oxide nanoparticles deposited from the gas phase

    NASA Astrophysics Data System (ADS)

    Busch, C.; Schierning, G.; Theissmann, R.; Nedic, A.; Kruis, F. E.; Schmechel, R.

    2012-06-01

    The fabrication of semiconducting functional layers using low-temperature processes is of high interest for flexible printable electronics applications. Here, the one-step deposition of semiconducting nanoparticles from the gas phase for an active layer within a thin-film transistor is described. Layers of semiconducting nanoparticles with a particle size between 10 and 25 nm were prepared by the use of a simple aerosol deposition system, excluding potentially unwanted technological procedures like substrate heating or the use of solvents. The nanoparticles were deposited directly onto standard thin-film transistor test devices, using thermally grown silicon oxide as gate dielectric. Proof-of-principle experiments were done deploying two different wide-band gap semiconducting oxides, tin oxide, SnO x , and indium oxide, In2O3. The tin oxide spots prepared from the gas phase were too conducting to be used as channel material in thin-film transistors, most probably due to a high concentration of oxygen defects. Using indium oxide nanoparticles, thin-film transistor devices with significant field effect were obtained. Even though the electron mobility of the investigated devices was only in the range of 10-6 cm2 V-1 s-1, the operability of this method for the fabrication of transistors was demonstrated. With respect to the possibilities to control the particle size and layer morphology in situ during deposition, improvements are expected.

  7. Photoelectrochemical behaviour of CdIn2S4 films deposited by pulse electrodeposition using non-aqueous electrolyte

    NASA Astrophysics Data System (ADS)

    Jayanthi, Chockalingam; Dhanapandian, Swaminathan; Murali, Kollegal Ramakrishna

    2013-12-01

    CdIn2S4 films were deposited by the pulse electrodeposition technique on tin oxide-coated glass substrates, at different duty cycles in the range of 6%-50%. The deposition potential was -0.7 V vs. saturated calomel electrode (SCE) using non-aqueous di(ethylene glycol) electrolyte. XRD analysis of the films indicated polycrystalline nature. Grain size, strain and dislocation density were evaluated from the XRD data. EDX analysis of the surface composition confirms the formation of stoichiometric CdIn2S4 films. Optical studies show a direct band-gap values in the range of 2.14-2.23 eV for the films deposited at different duty cycles. Room temperature resistivity of the films was in the range of 40-21 Ω·cm with the increase of duty cycle. Photoelectrochemical (PEC) solar cells constructed with the films deposited at 50% duty cycle and post-heat-treated at 500°C indicated open circuit voltage ( V oc) of 0.595 V, short circuit current density ( J sc) of 6.20 mA·cm-2, fill factor (ff) of 0.61, efficiency ( η) of 3.75%, series resistance ( R s) of 4 Ω and shunt resistance ( R sh) of 2.50kΩ. Making use of the advantages of pulse electrodeposition it can be used to deposit nanocrystalline films which can be employed in optoelectronic and photovoltaic devices.

  8. Pulsed Laser Deposition of the Ni-Base Superalloy Films

    NASA Astrophysics Data System (ADS)

    Shin, Joonghan; Mazumder, Jyotirmoy

    2016-03-01

    Ni-base superalloy films were deposited on single-crystal (SC) Ni-base superalloy substrates from a target with the same alloy composition by pulsed laser deposition (PLD) technique. Microstructure and growth behavior of the films deposited were investigated by X-ray diffraction and scanning electron microscopy, and atomic force microscope. The homoepitaxial growth of the SC Ni-base superalloy film occurred at the 1123 K (850 °C) substrate temperature and 2 J/cm2 pulse energy. Films generally exhibited a strong polycrystalline characteristic as the substrate temperature and pulse energy increased. The SC film had a smooth surface. The measured root mean square roughness of the SC film surface was ~6 nm. Based on the Taguchi analysis, the substrate temperature and pulse energy were the most significant process parameters influencing the structural characteristics of the films. Also, the influence of the pulse repletion rate and deposition time was not found to be significant.

  9. Laser direct patterning of indium tin oxide for defining a channel of thin film transistor.

    PubMed

    Wang, Jian-Xun; Kwon, Sang Jik; Han, Jae-Hee; Cho, Eou Sik

    2013-11-01

    In this work, using a Q-switched diode-pumped neodymium-doped yttrium vanadate (Nd:YVO4, lambda = 1064 nm) laser, a direct patterning of indium tin oxide (ITO) channel was realized on glass substrates and the results were compared and analyzed in terms of the effect of repetition rate, scanning speed on etching characteristics. The results showed that the laser conditions of 40 kHz repetition rate with a scanning speed of 500 mm/s were appropriate for the channeling of ITO electrodes. The length of laser-patterned channel was maintained at about 55 microm. However, residual spikes (about 50 nm in height) of ITO were found to be formed at the edges of the laser ablated area and a few ITO residues remained on the glass substrate after laser scanning. By dipping the laser-ablated ITO film in ITO diluted etchant (ITO etchant/DI water: 1/10) at 50 degrees C for 3 min, the spikes and residual ITO were effectively removed. At last, using the laser direct patterning, a bottom-source-drain indium gallium zinc oxide thin film transistor (IGZO-TFT) was fabricated. It is successfully demonstrated that the laser direct patterning can be utilized instead of photolithography to simplify the fabrication process of TFT channel, resulting in the increase of productivity and reduction of cost.

  10. Reentrant resistive behavior and dimensional crossover in disordered superconducting TiN films

    DOE PAGES

    Postolova, Svetlana V.; Mironov, Alexey Yu.; Baklanov, Mikhail R.; ...

    2017-05-11

    A reentrant temperature dependence of the normal state resistance often referred to as the N-shaped temperature dependence, is omnipresent in disordered superconductors – ranging from high-temperature cuprates to ultrathin superconducting films – that experience superconductor-to-insulator transition. Yet, despite the ubiquity of this phenomenon its origin still remains a subject of debate. Here we investigate strongly disordered superconducting TiN films and demonstrate universality of the reentrant behavior. We offer a quantitative description of the N-shaped resistance curve. We show that upon cooling down the resistance first decreases linearly with temperature and then passes through the minimum that marks the 3D-2D crossovermore » in the system. In the 2D temperature range the resistance first grows with decreasing temperature due to quantum contributions and eventually drops to zero as the system falls into a superconducting state. As a result, our findings demonstrate the prime importance of disorder in dimensional crossover effects.« less

  11. Electrical properties of magnesium incorporated zinc tin oxide thin film transistors by solution process.

    PubMed

    Jeon, In Young; Lee, Ji Yoon; Yoon, Dae Ho

    2013-03-01

    Zinc tin oxide (ZTO) films were fabricated on SiO2/Si substrate as a function of Mg concentration (the ratio of 3 to 10 atomic%) using a spin-coating process. For the characterization of thin film transistors (TFTs), Zn0.3Sn0.70 channel TFT exhibited a higher on/off ratio compared to Zn0.5 Sn.0.5O channel TFT because the higher Sn concentration can induce more charge carriers. 3 atomic% Mg incorporated Zn0.3Sn0.7O channel TFTs showed stable electrical performances such as I(on/off) - 1 x 10(7), micro(sat) = 1.40 cm2 V(-1) s(-1), and S = 0.39 V/decade. However, 10 atomic% Mg incorporated Zn0.3Sn0.7O channel TFTs deteriorated their electrical performances due to Mg segregation. The Mg incorporated Zn0.3Sn0.7O channel TFTs effectively suppress off-current and threshold voltage change during positive gate bias stress due to their strong bonding with oxygen.

  12. Electrical and optical properties of thin films consisting of tin-doped indium oxide nanoparticles

    NASA Astrophysics Data System (ADS)

    Ederth, J.; Johnsson, P.; Niklasson, G. A.; Hoel, A.; Hultåker, A.; Heszler, P.; Granqvist, C. G.; van Doorn, A. R.; Jongerius, M. J.; Burgard, D.

    2003-10-01

    Electrical transport and optical properties were investigated in porous thin films consisting of In2O3:Sn (indium tin oxide, ITO) nanoparticles with an initial crystallite size of ˜16 nm and a narrow size distribution. Temperature dependent resistivity was measured in the 77130 K and negative at t<130 K. Effects of annealing on the ITO nanoparticles were investigated by analyzing the spectral optical reflectance and transmittance using effective medium theory and accounting for ionized impurity scattering. Annealing was found to increase both charge carrier concentration and mobility. The ITO nanoparticles were found to have a resistivity as low as 2×10-4 Ω cm, which is comparable to the resistivity of dense high quality In2O3:Sn films. Particulate samples with a luminous transmittance exceeding 90% and a resistivity of ˜10-2 Ω cm were obtained.

  13. Thick-Film Yttrium Iron Garnet Coatings via Aerosol Deposition

    NASA Astrophysics Data System (ADS)

    Johnson, Scooter D.; Glaser, Evan R.; Cheng, Shu-Fan; Eddy, Charles R.; Kub, Fritz; Gorzkowski, Edward P.

    2016-03-01

    Aerosol deposition is a thick-film deposition process that can produce layers up to several hundred micrometers thick with densities greater than 95 pct of the theoretical value. The primary advantage of aerosol deposition is that the deposition takes place entirely at room temperature, thereby enabling film growth in material systems with disparate melting temperatures. We show representative characterization results of yttrium iron garnet thick films deposited onto a <111> gadolinium gallium garnet substrate by aerosol deposition using scanning electron microscopy, X-ray diffraction, profilometry, vibrating sample magnetometry, and ferromagnetic resonance. To further elucidate the effect of density and grain size on the magnetic properties, we perform post-deposition annealing of the films to study the effect on the structural and magnetic properties of the films. Our results indicate that our system can successfully deposit dense, thick yttrium iron garnet films and that with moderate annealing the films can achieve a ferromagnetic resonance linewidth comparable to that reported for polycrystalline films deposited by other higher temperature growth techniques.

  14. Nanomechanical and nanotribological properties of Nb substituted TiN thin films

    SciTech Connect

    Krishna, M. Ghanashyam; Vasu, K.; Padmanabhan, K. A.

    2012-06-25

    Nanomechanical and nanotribological properties of Ti{sub 1-x}Nb{sub x}N (0{<=}x{<=}1) thin films were investigated as a function x. The films were deposited onto polycrystalline nuclear grade 316LN stainless steel (SS) substrate by radio frequency magnetron sputtering in 100% N{sub 2} plasma. The hardness and Young's modulus increased while the friction coefficient and wear volume decreased with increasing Nb substitution. The highest hardness achieved was 31GPa for x=0.77. At the same Nb concentration, the friction coefficient was 0.15 and the elastic recovery was 60%.

  15. Atomic layer deposition and properties of mixed Ta2O5 and ZrO2 films

    NASA Astrophysics Data System (ADS)

    Kukli, Kaupo; Kemell, Marianna; Vehkamäki, Marko; Heikkilä, Mikko J.; Mizohata, Kenichiro; Kalam, Kristjan; Ritala, Mikko; Leskelä, Markku; Kundrata, Ivan; Fröhlich, Karol

    2017-02-01

    Thin solid films consisting of ZrO2 and Ta2O5 were grown by atomic layer deposition at 300 °C. Ta2O5 films doped with ZrO2, TaZr2.75O8 ternary phase, or ZrO2 doped with Ta2O5 were grown to thickness and composition depending on the number and ratio of alternating ZrO2 and Ta2O5 deposition cycles. All the films grown exhibited resistive switching characteristics between TiN and Pt electrodes, expressed by repetitive current-voltage loops. The most reliable windows between high and low resistive states were observed in Ta2O5 films mixed with relatively low amounts of ZrO2, providing Zr to Ta cation ratio of 0.2.

  16. Deposition of electrochromic tungsten oxide thin films by plasma-enhanced chemical vapor deposition

    SciTech Connect

    Henley, W.B.; Sacks, G.J.

    1997-03-01

    Use of plasma-enhanced chemical vapor deposition (PECVD) for electrochromic WO{sub 3} film deposition is investigated. Oxygen, hydrogen, and tungsten hexafluoride were used as source gases. Reactant gas flow was investigated to determine the effect on film characteristics. High quality optical films were obtained at deposition rates on the order of 100 {angstrom}/s. Higher deposition rates were attainable but film quality and optical coherence degraded. Atomic emission spectroscopy (AES), was used to provide an in situ assessment of the plasma deposition chemistry. Through AES, it is shown that the hydrogen gas flow is essential to the deposition of the WO{sub 3} film. Oxygen gas flow and tungsten hexafluoride gas flow must be approximately equal for high quality films.

  17. Tin re-deposition and erosion measured by cavity-ring-down-spectroscopy under a high flux plasma beam

    NASA Astrophysics Data System (ADS)

    Kvon, V.; Al, R.; Bystrov, K.; Peeters, F. J. J.; van de Sanden, M. C. M.; Morgan, T. W.

    2017-08-01

    Cavity-ring-down spectroscopy (CRDS) was implemented to measure the re-deposition of liquid tin under a high flux plasma beam in the linear plasma device Pilot-PSI. A capillary porous system (CPS) consisting of a molybdenum cup and tungsten meshes (pores diameters of 0.2 mm and 0.44 mm) was filled with tin and exposed to argon plasma. The absorption of a UV laser-beam at 286.331 nm was used to determine a number of sputtered neutral tin atoms. The incoming flux of argon ions of ~50 eV was 1.6-2.7  ×  1023 m-2 s-1, and the sample temperature measured by pyrometry varied from 850 °C to 1200 °C during exposures. The use of CRDS for measuring absolute number of particles under such plasma exposure was demonstrated for the first time. The number of sputtered tin particles in the cavity region assuming no losses would be expected to be 5.5  ×  1011-1.2  ×  1012 while CRDS measurements showed only 5.7-9.9  ×  108. About 98-99.8% of sputtered particles were therefore found to not reach the CRDS observation volume. Spectroscopic ratios of Sn I to Sn II ions, as well as equilibrium considerations, indicate that fast ionization as well as plasma entrainment of neutrals is responsible for the discrepancy. This would lead to high re-deposition rates, implying a lowered contamination rate of core plasma and lower required replenishment rates at high-flux conditions than would otherwise be expected.

  18. On the uniformity of films fabricated by glancing angle deposition

    NASA Astrophysics Data System (ADS)

    Wakefield, Nicholas G.; Sit, Jeremy C.

    2011-04-01

    Films fabricated using the glancing angle deposition technique are subject to significant variations in several important film parameters across a sample due to geometric conditions that are not uniform across the substrate. This paper presents a method to quantify the non-uniformities in these quantities, starting from a generalized geometric framework, for low-pressure, physical vapor deposition of thin films on substrates of arbitrary size and position. This method is applicable to any glancing angle deposition setup including substrate tilt and rotation but focuses on the case of constant deposition angle and arbitrary azimuthal rotation. While some quantities, such as the effective deposition angle and the deposited mass per unit area at any given point on the substrate can be determined purely from the geometry of the deposition setup, obtaining further quantities, such as the film density and thickness, requires additional, material-specific information that is easily measured.

  19. Fabrication and characterization of highly transparent and conductive indium tin oxide films made with different solution-based methods

    NASA Astrophysics Data System (ADS)

    Xia, N.; Gerhardt, R. A.

    2016-11-01

    Solution-based fabrication methods can greatly reduce the cost and broaden the applications of transparent conducting oxides films, such as indium tin oxide (ITO) films. In this paper, we report on ITO films fabricated by spin coating methods on glass substrates with two different ITO sources: (1) a commercial ITO nanopowder water dispersion and (2) a sol-gel ITO solution. A simple and fast air annealing process was used to treat as-coated ITO films on a controlled temperature hot plate. Thermogravimetric analysis and x-ray diffraction showed that highly crystalline ITO films were formed after the annealing steps. The final ITO films had a good combination of optical properties and electrical properties, especially for films made from five layers of sol-gel ITO (92.66% transmittance and 8.7 × 10-3 Ω cm resistivity). The surface morphology and conducting network on the ITO films were characterized by non-contact and current atomic force microscopy. It was found that conducting paths were only partially connected for the nanoparticle ITO dispersion films, whereas the sol-gel ITO films had a more uniformly distributed conducting network on the surface. We also used the sol-gel ITO films to fabricate a simple liquid crystal display (LCD) device to demonstrate the excellent properties of our films.

  20. A difference in using atomic layer deposition or physical vapour deposition TiN as electrode material in metal-insulator-metal and metal-insulator-silicon capacitors.

    PubMed

    Groenland, A W; Wolters, R A M; Kovalgin, A Y; Schmitz, J

    2011-09-01

    In this work, metal-insulator-metal (MIM) and metal-insulator-silicon (MIS) capacitors are studied using titanium nitride (TiN) as the electrode material. The effect of structural defects on the electrical properties on MIS and MIM capacitors is studied for various electrode configurations. In the MIM capacitors the bottom electrode is a patterned 100 nm TiN layer (called BE type 1), deposited via sputtering, while MIS capacitors have a flat bottom electrode (called BE type 2-silicon substrate). A high quality 50-100 nm thick SiO2 layer, made by inductively-coupled plasma CVD at 150 degrees C, is deposited as a dielectric on top of both types of bottom electrodes. BE type 1 (MIM) capacitors have a varying from low to high concentration of structural defects in the SiO2 layer. BE type 2 (MIS) capacitors have a low concentration of structural defects and are used as a reference. Two sets of each capacitor design are fabricated with the TiN top electrode deposited either via physical vapour deposition (PVD, i.e., sputtering) or atomic layer deposition (ALD). The MIM and MIS capacitors are electrically characterized in terms of the leakage current at an electric field of 0.1 MV/cm (I leak) and for different structural defect concentrations. It is shown that the structural defects only show up in the electrical characteristics of BE type 1 capacitors with an ALD TiN-based top electrode. This is due to the excellent step coverage of the ALD process. This work clearly demonstrates the sensitivity to process-induced structural defects, when ALD is used as a step in process integration of conductors on insulation materials.

  1. Thickness Dependence of Properties of ITO Films Deposited on PET Substrates.

    PubMed

    Kim, Seon Tae; Kim, Tae Gyu; Cho, Hyun; Yoon, Su Jong; Kim, Hye Sung; Kim, Jin Kon

    2016-02-01

    Indium tin oxide (ITO) films with various thicknesses from 104 nm to 513 nm were prepared onto polyethylene terephthalate (PET) substrates by using r.f. magnetron sputtering without intentionally heating the substrates. The structural, optical, and electrical properties of ITO films were investigated as a function of film thickness. It was found that the amorphous nature of the ITO film was dominant below the thickness of about 200 nm but the degree of the crystallinity increased with an increasing thickness above the thickness of about 250 nm, resulting in the increase of carrier concentration and therefore reducing the electrical resistivity from 5.1 x 10(-3) to 9.4 x 10(-4) omega x cm. The average transmittance (400-800 nm) of the ITO deposited PET substrates decreased as the film thickness was increasing and was above 80% for the thickness below 315 nm. The results show that the improvement of the film crystallinity with the film thickness contributes to the increase of the carrier concentration and the enhancement of the electrical conductivity.

  2. Chemical vapor deposition of titanium{endash}silicon{endash}nitride films

    SciTech Connect

    Smith, P.M.; Custer, J.S.

    1997-06-01

    Titanium{endash}silicon{endash}nitride films were grown by metal-organic chemical vapor deposition. At temperatures between 300 and 450{degree}C, tetrakis(diethylamido)titanium, ammonia, and silane react to form films with average compositions near the TiN{endash}Si{sub 3}N{sub 4} tie line and low impurity contents (C{lt}1.5at.{percent}, H between 5 and 15 at.{percent}, with no other impurities present). The film resistivity is a strong function of Si content in the films, ranging continuously from 400 {mu}{Omega}cm for pure TiN up to 1 {Omega}cm for films with 25 at.{percent} Si. Step coverages of approximately 75{percent} on 0.35 {mu}m, 3:1 aspect ratio trenches, and 35{percent}{endash}40{percent} on 0.1{mu}m/10:1 trenches are found for films with resistivities below 1000 {mu}{Omega}cm. These films are promising candidates for diffusion barriers in microelectronic applications. {copyright} {ital 1997 American Institute of Physics.}

  3. Effect of deposition temperature on the chemical properties of thermally deposited silicon nitride films

    NASA Astrophysics Data System (ADS)

    Patil, L. S.; Pandey, R. K.; Bange, Jaspal P.; Gaikwad, S. A.; Gautam, D. K.

    2005-01-01

    Silicon nitride (Si 3N 4) films have been deposited by using dimethyl dichloro silane (DMDS) as a source of silicon and ammonia (NH 3) gas as a source of nitrogen at 760-860 °C deposition temperature by thermal-CVD system. An extensive analysis of the chemical properties of the films was carried out using Ellipsometry and Fourier Transform Infrared (FTIR) Spectroscopy measurements. The deposited silicon nitride films show the presence of hydrogen bonded to silicon and nitrogen. The relative number of Si-H, N-H, and Si-N bonds has been estimated and the Si-H, N-H and Si-N-Si stretching characteristic peaks of Si 3N 4 films have also been observed with significant intensities through FTIR spectroscopy as a function of deposition temperature. It has been found that films deposited in the temperature range of 760-860 °C, have some amount of hydrogen contents. The total hydrogen concentration in the films decreases with corresponding increase in deposition temperature, which reveals that the densification of deposited films increases on increasing the deposition temperature. The film properties including N-H/Si-H ratio, hydrogen content, and density of films are most sensitive to change in the deposition temperature.

  4. Characterization of copper selenide thin films deposited by chemical bath deposition technique

    NASA Astrophysics Data System (ADS)

    Al-Mamun; Islam, A. B. M. O.

    2004-11-01

    A low-cost chemical bath deposition (CBD) technique has been used for the preparation of Cu2-xSe thin films onto glass substrates and deposited films were characterized by X-ray diffractometry (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and UV-vis spectrophotometry. Good quality thin films of smooth surface of copper selenide thin films were deposited using sodium selenosulfate as a source of selenide ions. The structural and optical behaviour of the films are discussed in the light of the observed data.

  5. Processing of Copper Zinc Tin Sulfide Nanocrystal Dispersions for Thin Film Solar Cells

    NASA Astrophysics Data System (ADS)

    Williams, Bryce Arthur

    A scalable and inexpensive renewable energy source is needed to meet the expected increase in electricity demand throughout the developed and developing world in the next 15 years without contributing further to global warming through CO2 emissions. Photovoltaics may meet this need but current technologies are less than ideal requiring complex manufacturing processes and/or use of toxic, rare-earth materials. Copper zinc tin sulfide (Cu 2ZnSnS4, CZTS) solar cells offer a true "green" alternative based upon non-toxic and abundant elements. Solution-based processes utilizing CZTS nanocrystal dispersions followed by high temperature annealing have received significant research attention due to their compatibility with traditional roll-to-roll coating processes. In this work, CZTS nanocrystal (5-35 nm diameters) dispersions were utilized as a production pathway to form solar absorber layers. Aerosol-based coating methods (aerosol jet printing and ultrasonic spray coating) were optimized for formation of dense, crack-free CZTS nanocrystal coatings. The primary variables underlying determination of coating morphology within the aerosol-coating parameter space were investigated. It was found that the liquid content of the aerosol droplets at the time of substrate impingement play a critical role. Evaporation of the liquid from the aerosol droplets during coating was altered through changes to coating parameters as well as to the CZTS nanocrystal dispersions. In addition, factors influencing conversion of CZTS nanocrystal coatings into dense, large-grained polycrystalline films suitable for solar cell development during thermal annealing were studied. The roles nanocrystal size, carbon content, sodium uptake, and sulfur pressure were found to have pivotal roles in film microstructure evolution. The effects of these parameters on film morphology, grain growth rates, and chemical makeup were analyzed from electron microscopy images as well as compositional analysis

  6. Photoelectrochemical performance of W-doped BiVO4 thin films deposited by spray pyrolysis

    NASA Astrophysics Data System (ADS)

    Holland, S. Keith; Dutter, Melissa R.; Lawrence, David J.; Reisner, Barbara A.; DeVore, Thomas C.

    2014-01-01

    The effects of tungsten doping and hydrogen annealing on the photoelectrochemical (PEC) performance of bismuth vanadate (BiVO4) photoanodes for solar water splitting were studied. Thin films of BiVO were deposited on indium tin oxide-coated glass slides by ultrasonic spray pyrolysis of an aqueous solution containing bismuth nitrate and vanadium oxysulfate. Tungsten doping was achieved by adding either silicotungstic acid (STA) or ammonium metatungstate (AMT) to the precursor. The 1.7- to 2.2-μm-thick films exhibited a highly porous microstructure. Undoped films that were reduced at 375°C in 3% H exhibited the largest photocurrent densities under 0.1 W cm-2 AM1.5 illumination, where photocurrent densities of up to 1.3 mA cm-2 at 0.5 V with respect to Ag/AgCl were achieved. Films doped with 1% or 5% (atomic percent) tungsten from either STA or AMT exhibited reduced PEC performance and greater sample-to-sample performance variations. Powder x-ray diffraction data indicated that the films continue to crystallize in the monoclinic polymorph at low doping levels but crystallize in the tetragonal scheelite structure at higher doping. It is surmised that the phase and morphology differences promoted by the addition of W during the deposition process reduced the PEC performance as measured by photovoltammetry.

  7. Formation of diamond nanoparticle thin films by electrophoretic deposition

    NASA Astrophysics Data System (ADS)

    Goto, Yosuke; Ohishi, Fujio; Tanaka, Kuniaki; Usui, Hiroaki

    2016-03-01

    Thin films of diamond nanoparticles were prepared by electrophoretic deposition (EPD) using 0.5 wt % dispersions in water, ethanol, and 2-propanol. The film growth rate increased with increasing voltage applied to the electrodes. However, an excessive increase in voltage caused the degradation of film morphology. The optimum voltage was 4 V with an electrode separation of 5 mm. The film growth rate was higher in organic solvents than in water. The deposited film had a smooth surface with an average surface roughness comparable to the size of primary particles of the source material. It is notable that the EPD films had a considerably higher physical stability than spin-coated and cast films. The stability was further improved by thermally annealing the films. IR analysis revealed that the diamond nanoparticles have carboxy and amino groups on their surfaces. It is considered that the stability of the EPD films originate from a chemical reaction between these functional groups.

  8. Cubic Structure and Cation Disordering in Ybco Thin Film Deposited by High Speed Pulsed Laser Deposition

    NASA Astrophysics Data System (ADS)

    Suh, Jeong-Dae; Sung, Gun Yong; Kang, Kwang Yong

    We have investigated the crystalline structure of high rate deposited YBa2Cu3Ox thin films prepared by high speed pulsed laser deposition. A cation disordered cubic structure with lattice parameter of 0.39 nm was found in YBCO thin film deposited at 12.2 nm/s deposition rate and 650°C substrate temperature conditions. The short range ordered cubic YBa2Cu3Ox thin film growth at high deposition rate was explained by the short migration length of Y and Ba cation atoms owing to the high incident flux rate.

  9. Bismuth thin films obtained by pulsed laser deposition

    NASA Astrophysics Data System (ADS)

    Flores, Teresa; Arronte, Miguel; Rodriguez, Eugenio; Ponce, Luis; Alonso, J. C.; Garcia, C.; Fernandez, M.; Haro, E.

    1999-07-01

    In the present work Bi thin films were obtained by Pulsed Laser Deposition, using Nd:YAG lasers. The films were characterized by optical microscopy. Raman spectroscopy and X-rays diffraction. It was accomplished the real time spectral emission characterization of the plasma generated during the laser evaporation process. Highly oriented thin films were obtained.

  10. Thin film deposition using rarefied gas jet

    NASA Astrophysics Data System (ADS)

    Pradhan, Sahadev, , Dr.

    2017-01-01

    The rarefied gas jet of aluminium is studied at Mach number Ma =(U_j /√{ kbTj / m }) in the range .01 deposition mechanisms in a physical vapor deposition (PVD) process for the development of the highly oriented pure metallic aluminum thin film with uniform thickness and strong adhesion on the surface of the substrate in the form of ionic plasma, so that the substrate can be protected from corrosion and oxidation and thereby enhance the lifetime and safety, and to introduce the desired surface properties for a given application. Here, H is the characteristic dimension, U_j and T_j are the jet velocity and temperature, n_d is the number density of the jet, m and d are the molecular mass and diameter, and kb is the Boltzmann constant. An important finding is that the capture width (cross-section of the gas jet deposited on the substrate) is symmetric around the centerline of the substrate, and decreases with increased Mach number due to an increase in the momentum of the gas molecules. DSMC simulation results reveals that at low Knudsen number ((Kn =0.01); shorter mean free paths), the atoms experience more collisions, which direct them toward the substrate. However, the atoms also move with lower momentum at low Mach number ,which allows scattering collisions to rapidly direct the atoms to the substrate.

  11. Thin film deposition using rarefied gas jet

    NASA Astrophysics Data System (ADS)

    Pradhan, Sahadev, , Dr.

    2016-11-01

    The rarefied gas jet of aluminium is studied at Mach number Ma = (Uj /√{ kbTj / m }) in the range .01 deposition mechanisms in a physical vapor deposition (PVD) process for the development of the highly oriented pure metallic aluminum thin film with uniform thickness and strong adhesion on the surface of the substrate in the form of ionic plasma, so that the substrate can be protected from corrosion and oxidation and thereby enhance the lifetime and safety, and to introduce the desired surface properties for a given application. Here, His the characteristic dimension, Uj and Tj are the jet velocity and temperature, nd is the number density of the jet, m and d are the molecular mass and diameter, and kb is the Boltzmann constant. An important finding is that the capture width (cross-section of the gas jet deposited on the substrate) is symmetric around the centerline of the substrate, and decreases with increased Mach number due to an increase in the momentum of the gas molecules. DSMC simulation results reveals that at low Knudsen number ((Kn = 0 . 01) ; shorter mean free paths), the atoms experience more collisions, which direct them toward the substrate. However, the atoms also move with lower momentum at low Mach number, which allows scattering collisions to rapidly direct the atoms to the substrate.

  12. Thin film deposition using rarefied gas jet

    NASA Astrophysics Data System (ADS)

    Pradhan, Sahadev

    2016-10-01

    The rarefied gas jet of aluminium is studied at Mach number Ma =(U_j ∖√{ kbTj / m }) in the range .01 deposition mechanisms in a physical vapor deposition (PVD) process for the development of the highly oriented pure metallic aluminum thin film with uniform thickness and strong adhesion on the surface of the substrate in the form of ionic plasma, so that the substrate can be protected from corrosion and oxidation and thereby enhance the lifetime and safety, and to introduce the desired surface properties for a given application. Here, H is the characteristic dimension, U_j and T_j are the jet velocity and temperature, n_d is the number density of the jet, m and d are the molecular mass and diameter, and kb is the Boltzmann constant. An important finding is that the capture width (cross-section of the gas jet deposited on the substrate) is symmetric around the centerline of the substrate, and decreases with increased Mach number due to an increase in the momentum of the gas molecules. DSMC simulation results reveals that at low Knudsen number ((Kn = 0.01); shorter mean free paths), the atoms experience more collisions, which direct them toward the substrate. However, the atoms also move with lower momentum at low Mach number ,which allows scattering collisions to rapidly direct the atoms to the substrate.

  13. Precursors for the polymer-assisted deposition of films

    DOEpatents

    McCleskey, Thomas M.; Burrell, Anthony K.; Jia, Quanxi; Lin, Yuan

    2013-09-10

    A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.

  14. Sputter deposited W1-x-yNixTiyO3 thin films: Electrochromic properties and durability

    NASA Astrophysics Data System (ADS)

    Morales-Luna, M.; Arvizu, M. A.; Granqvist, C. G.; Niklasson, G. A.

    2016-02-01

    Previous research demonstrated that a small amount of nickel enhances the coloration efficiency of tungsten-nickel oxide electrochromic (EC) thin films with respect to that of pure tungsten oxide (WO3) films. Furthermore the incorporation of titanium gives an improvement in the durability of tungsten-titanium oxide EC thin films. In this work we investigated the EC performance of tungsten-nickel-titanium oxide (W1-x-yNixTiyO3) EC thin films with emphasis on durability. The films were deposited on indium tin oxide covered glass by reactive dc sputtering from tungsten, tungsten-titanium alloy and nickel targets. Cyclic voltammetry was performed using 1 M LiClO4 in propylene carbonate as electrolyte. The voltage window was chosen to induce fast degradation of the samples within 80 cycles. Elemental compositions were obtained by Rutherford Backscattering Spectroscopy.

  15. Investigation of new stilbazolium dye thin films deposited by pulsed laser deposition

    NASA Astrophysics Data System (ADS)

    Sotirov, S.; Todorova, M.; Draganov, M.; Penchev, P.; Bakalska, R.; Serbezov, V.

    2013-03-01

    In present work we report the analysis of thin films and targets from new stilbazolium dye E-4-(2-(4- hydroxynaphthalen-1-yl)vinyl)-1-octylquinolinium iodide (D1) deposited by Pulsed Laser Deposition (PLD) technique using high power UV TEA N2 laser. The thin films are deposited onto substrates - KBr, 316L SS alloy, optical glass and aluminum foil. The films were characterized by FTIR spectroscopy, bright field microscopy, fluorescence microscopy and atomic force microscopy (AFM) analysis. FTIR spectroscopic analysis of thin films and target material shows small differences between deposited films and native substance. The films are found to be homogeneous by AFM results and without any cracks and droplets on the surfaces. The present study demonstrates the ability of PLD technique to provide thin films from new stilbazolium dyes with good quality when they are applied as non-linear optical (NLO) organic materials on different type of substrates.

  16. Epitaxial Growth of GaN Nanowires with High Structural Perfection on a Metallic TiN Film.

    PubMed

    Wölz, M; Hauswald, C; Flissikowski, T; Gotschke, T; Fernández-Garrido, S; Brandt, O; Grahn, H T; Geelhaar, L; Riechert, H

    2015-06-10

    Vertical GaN nanowires are grown in a self-induced way on a sputtered Ti film by plasma-assisted molecular beam epitaxy. Both in situ electron diffraction and ex situ ellipsometry show that Ti is converted to TiN upon exposure of the surface to the N plasma. In addition, the ellipsometric data demonstrate this TiN film to be metallic. The diffraction data evidence that the GaN nanowires have a strict epitaxial relationship to this film. Photoluminescence spectroscopy of the GaN nanowires shows excitonic transitions virtually identical in spectral position, line width, and decay time to those of state-of-the-art GaN nanowires grown on Si. Therefore, the crystalline quality of the GaN nanowires grown on metallic TiN and on Si is equivalent. The freedom to employ metallic substrates for the epitaxial growth of semiconductor nanowires in high structural quality may enable novel applications that benefit from the associated high thermal and electrical conductivity as well as optical reflectivity.

  17. New deposition processes for the growth of oxide and nitride thin films

    SciTech Connect

    Apen, E.A.; Atagi, L.M.; Barbero, R.S.; Espinoza, B.F.; Hubbard, K.M.; Salazar, K.V.; Samuels, J.A.; Smith, D.C.; Hoffman, D.M.

    1998-11-01

    This is the final report of a three-year, Laboratory Directed Research and Development (LDRD) project at Los Alamos National Laboratory (LANL). The goal of this effort is to study the use of homoleptic metal amido compounds as precursors for chemical vapor deposition (CVD). The amides offer potential for the deposition of a variety of important materials at low temperatures. The establishment of these precursor compounds will enhance the ability to exploit the properties of advanced materials in numerous coatings applications. Experiments were performed to study the reactivity of Sn[NMe{sub 2}]{sub 4} with oxygen. The data demonstrated that gas-phase insertion of oxygen into the Sn-N bond, leading to a reactive intermediate, plays an important role in tin oxide deposition. Several CVD processes for technologically important materials were developed using the amido precursor complexes. These included the plasma enhanced CVD of TiN and Zr{sub 3}N{sub 4}, and the thermal CVD of GaN and Al N. Quality films were obtained in each case, demonstrating the potential of the amido compounds as CVD precursors.

  18. Low sheet resistance titanium nitride films by low-temperature plasma-enhanced atomic layer deposition using design of experiments methodology

    SciTech Connect

    Burke, Micheal Blake, Alan; Povey, Ian M.; Schmidt, Michael; Petkov, Nikolay; Carolan, Patrick; Quinn, Aidan J.

    2014-05-15

    A design of experiments methodology was used to optimize the sheet resistance of titanium nitride (TiN) films produced by plasma-enhanced atomic layer deposition (PE-ALD) using a tetrakis(dimethylamino)titanium precursor in a N{sub 2}/H{sub 2} plasma at low temperature (250 °C). At fixed chamber pressure (300 mTorr) and plasma power (300 W), the plasma duration and N{sub 2} flow rate were the most significant factors. The lowest sheet resistance values (163 Ω/sq. for a 20 nm TiN film) were obtained using plasma durations ∼40 s, N{sub 2} flow rates >60 standard cubic centimeters per minute, and purge times ∼60 s. Time of flight secondary ion mass spectroscopy data revealed reduced levels of carbon contaminants in the TiN films with lowest sheet resistance (163 Ω/sq.), compared to films with higher sheet resistance (400–600 Ω/sq.) while transmission electron microscopy data showed a higher density of nanocrystallites in the low-resistance films. Further significant reductions in sheet resistance, from 163 Ω/sq. to 70 Ω/sq. for a 20 nm TiN film (corresponding resistivity ∼145 μΩ·cm), were achieved by addition of a postcycle Ar/N{sub 2} plasma step in the PE-ALD process.

  19. Perovskite solar cells based on nanocolumnar plasma-deposited ZnO thin films.

    PubMed

    Ramos, F Javier; López-Santos, Maria C; Guillén, Elena; Nazeeruddin, Mohammad Khaja; Grätzel, Michael; Gonzalez-Elipe, Agustin R; Ahmad, Shahzada

    2014-04-14

    ZnO thin films having a nanocolumnar microstructure are grown by plasma-enhanced chemical vapor deposition at 423 K on pre-treated fluorine-doped tin oxide (FTO) substrates. The films consist of c-axis-oriented wurtzite ZnO nanocolumns with well-defined microstructure and crystallinity. By sensitizing CH3NH3PbI3 on these photoanodes a power conversion of 4.8% is obtained for solid-state solar cells. Poly(triarylamine) is found to be less effective when used as the hole-transport material, compared to 2,2',7,7'-tetrakis(N,N-di-p-methoxyphenylamine)-9,9'-spirobifluorene (spiro-OMeTAD), while the higher annealing temperature of the perovskite leads to a better infiltration in the nanocolumnar structure and an enhancement of the cell efficiency.

  20. Carbon Ion Irradiation Effects on Pulsed Laser Deposited Titanium Nitride Thin Films

    NASA Astrophysics Data System (ADS)

    Mahmood, Khaliq; Bashir, Shazia; Akram, Mahreen; Hayat, Asma; Faizan-Ul-Haq; Saadat, Shahzad

    2015-02-01

    Pulse laser deposited thin films of TiN are irradiated by 1 MeV carbon (C+) ions beam for various doses ranging 0.4 to 2.8 × 1014 ions/cm2. Atomic force microscopy (AFM) analysis reveals the formation of hillocks like structures after ion irradiation. X-ray diffraction (XRD) investigations show that the film crystallinity increases for lower doses ranging from 0.4 to 1.2 × 1014 ions/cm2 and decreases for higher doses (2 to 2.8 × 1014 ions/cm2) of ions. No new bands are identified from Raman spectroscopy. However, a noticeable change in microhardness has been observed. The hillock densities as well as hardness are strongly dependent upon ion dose.