Sample records for diffraction based overlay

  1. Diffraction based overlay and image based overlay on production flow for advanced technology node

    NASA Astrophysics Data System (ADS)

    Blancquaert, Yoann; Dezauzier, Christophe

    2013-04-01

    One of the main challenges for lithography step is the overlay control. For the advanced technology node like 28nm and 14nm, the overlay budget becomes very tight. Two overlay techniques compete in our advanced semiconductor manufacturing: the Diffraction based Overlay (DBO) with the YieldStar S200 (ASML) and the Image Based Overlay (IBO) with ARCHER (KLA). In this paper we will compare these two methods through 3 critical production layers: Poly Gate, Contact and first metal layer. We will show the overlay results of the 2 techniques, explore the accuracy and compare the total measurement uncertainty (TMU) for the standard overlay targets of both techniques. We will see also the response and impact for the Image Based Overlay and Diffraction Based Overlay techniques through a process change like an additional Hardmask TEOS layer on the front-end stack. The importance of the target design is approached; we will propose more adapted design for image based targets. Finally we will present embedded targets in the 14 FDSOI with first results.

  2. Overlay improvement methods with diffraction based overlay and integrated metrology

    NASA Astrophysics Data System (ADS)

    Nam, Young-Sun; Kim, Sunny; Shin, Ju Hee; Choi, Young Sin; Yun, Sang Ho; Kim, Young Hoon; Shin, Si Woo; Kong, Jeong Heung; Kang, Young Seog; Ha, Hun Hwan

    2015-03-01

    To accord with new requirement of securing more overlay margin, not only the optical overlay measurement is faced with the technical limitations to represent cell pattern's behavior, but also the larger measurement samples are inevitable for minimizing statistical errors and better estimation of circumstance in a lot. From these reasons, diffraction based overlay (DBO) and integrated metrology (IM) were mainly proposed as new approaches for overlay enhancement in this paper.

  3. Diffraction-based overlay metrology for double patterning technologies

    NASA Astrophysics Data System (ADS)

    Dasari, Prasad; Korlahalli, Rahul; Li, Jie; Smith, Nigel; Kritsun, Oleg; Volkman, Cathy

    2009-03-01

    The extension of optical lithography to 32nm and beyond is made possible by Double Patterning Techniques (DPT) at critical levels of the process flow. The ease of DPT implementation is hindered by increased significance of critical dimension uniformity and overlay errors. Diffraction-based overlay (DBO) has shown to be an effective metrology solution for accurate determination of the overlay errors associated with double patterning [1, 2] processes. In this paper we will report its use in litho-freeze-litho-etch (LFLE) and spacer double patterning technology (SDPT), which are pitch splitting solutions that reduce the significance of overlay errors. Since the control of overlay between various mask/level combinations is critical for fabrication, precise and accurate assessment of errors by advanced metrology techniques such as spectroscopic diffraction based overlay (DBO) and traditional image-based overlay (IBO) using advanced target designs will be reported. A comparison between DBO, IBO and CD-SEM measurements will be reported. . A discussion of TMU requirements for 32nm technology and TMU performance data of LFLE and SDPT targets by different overlay approaches will be presented.

  4. Diffraction based overlay metrology for α-carbon applications

    NASA Astrophysics Data System (ADS)

    Saravanan, Chandra Saru; Tan, Asher; Dasari, Prasad; Goelzer, Gary; Smith, Nigel; Woo, Seouk-Hoon; Shin, Jang Ho; Kang, Hyun Jae; Kim, Ho Chul

    2008-03-01

    Applications that require overlay measurement between layers separated by absorbing interlayer films (such as α- carbon) pose significant challenges for sub-50nm processes. In this paper scatterometry methods are investigated as an alternative to meet these stringent overlay metrology requirements. In this article, a spectroscopic Diffraction Based Overlay (DBO) measurement technique is used where registration errors are extracted from specially designed diffraction targets. DBO measurements are performed on detailed set of wafers with varying α-carbon (ACL) thicknesses. The correlation in overlay values between wafers with varying ACL thicknesses will be discussed. The total measurement uncertainty (TMU) requirements for these layers are discussed and the DBO TMU results from sub-50nm samples are reviewed.

  5. Evaluating diffraction based overlay metrology for double patterning technologies

    NASA Astrophysics Data System (ADS)

    Saravanan, Chandra Saru; Liu, Yongdong; Dasari, Prasad; Kritsun, Oleg; Volkman, Catherine; Acheta, Alden; La Fontaine, Bruno

    2008-03-01

    Demanding sub-45 nm node lithographic methodologies such as double patterning (DPT) pose significant challenges for overlay metrology. In this paper, we investigate scatterometry methods as an alternative approach to meet these stringent new metrology requirements. We used a spectroscopic diffraction-based overlay (DBO) measurement technique in which registration errors are extracted from specially designed diffraction targets for double patterning. The results of overlay measurements are compared to traditional bar-in-bar targets. A comparison between DBO measurements and CD-SEM measurements is done to show the correlation between the two approaches. We discuss the total measurement uncertainty (TMU) requirements for sub-45 nm nodes and compare TMU from the different overlay approaches.

  6. Diffraction-based overlay measurement on dedicated mark using rigorous modeling method

    NASA Astrophysics Data System (ADS)

    Lu, Hailiang; Wang, Fan; Zhang, Qingyun; Chen, Yonghui; Zhou, Chang

    2012-03-01

    Diffraction Based Overlay (DBO) is widely evaluated by numerous authors, results show DBO can provide better performance than Imaging Based Overlay (IBO). However, DBO has its own problems. As well known, Modeling based DBO (mDBO) faces challenges of low measurement sensitivity and crosstalk between various structure parameters, which may result in poor accuracy and precision. Meanwhile, main obstacle encountered by empirical DBO (eDBO) is that a few pads must be employed to gain sufficient information on overlay-induced diffraction signature variations, which consumes more wafer space and costs more measuring time. Also, eDBO may suffer from mark profile asymmetry caused by processes. In this paper, we propose an alternative DBO technology that employs a dedicated overlay mark and takes a rigorous modeling approach. This technology needs only two or three pads for each direction, which is economic and time saving. While overlay measurement error induced by mark profile asymmetry being reduced, this technology is expected to be as accurate and precise as scatterometry technologies.

  7. The effect of individually-induced processes on image-based overlay and diffraction-based overlay

    NASA Astrophysics Data System (ADS)

    Oh, SeungHwa; Lee, Jeongjin; Lee, Seungyoon; Hwang, Chan; Choi, Gilheyun; Kang, Ho-Kyu; Jung, EunSeung

    2014-04-01

    In this paper, set of wafers with separated processes was prepared and overlay measurement result was compared in two methods; IBO and DBO. Based on the experimental result, theoretical approach of relationship between overlay mark deformation and overlay variation is presented. Moreover, overlay reading simulation was used in verification and prediction of overlay variation due to deformation of overlay mark caused by induced processes. Through this study, understanding of individual process effects on overlay measurement error is given. Additionally, guideline of selecting proper overlay measurement scheme for specific layer is presented.

  8. High-throughput electrical characterization for robust overlay lithography control

    NASA Astrophysics Data System (ADS)

    Devender, Devender; Shen, Xumin; Duggan, Mark; Singh, Sunil; Rullan, Jonathan; Choo, Jae; Mehta, Sohan; Tang, Teck Jung; Reidy, Sean; Holt, Jonathan; Kim, Hyung Woo; Fox, Robert; Sohn, D. K.

    2017-03-01

    Realizing sensitive, high throughput and robust overlay measurement is a challenge in current 14nm and advanced upcoming nodes with transition to 300mm and upcoming 450mm semiconductor manufacturing, where slight deviation in overlay has significant impact on reliability and yield1). Exponentially increasing number of critical masks in multi-patterning lithoetch, litho-etch (LELE) and subsequent LELELE semiconductor processes require even tighter overlay specification2). Here, we discuss limitations of current image- and diffraction- based overlay measurement techniques to meet these stringent processing requirements due to sensitivity, throughput and low contrast3). We demonstrate a new electrical measurement based technique where resistance is measured for a macro with intentional misalignment between two layers. Overlay is quantified by a parabolic fitting model to resistance where minima and inflection points are extracted to characterize overlay control and process window, respectively. Analyses using transmission electron microscopy show good correlation between actual overlay performance and overlay obtained from fitting. Additionally, excellent correlation of overlay from electrical measurements to existing image- and diffraction- based techniques is found. We also discuss challenges of integrating electrical measurement based approach in semiconductor manufacturing from Back End of Line (BEOL) perspective. Our findings open up a new pathway for accessing simultaneous overlay as well as process window and margins from a robust, high throughput and electrical measurement approach.

  9. Diffraction-based overlay for spacer patterning and double patterning technology

    NASA Astrophysics Data System (ADS)

    Lee, Byoung Hoon; Park, JeongSu; Lee, Jongsu; Park, Sarohan; Lim, ChangMoon; Yim, Dong-Gyu; Park, Sungki; Ryu, Chan-Ho; Morgan, Stephen; van de Schaar, Maurits; Fuchs, Andreas; Bhattacharyya, Kaustuve

    2011-03-01

    Overlay performance will be increasingly important for Spacer Patterning Technology (SPT) and Double Patterning Technology (DPT) as various Resolution Enhancement Techniques are employed to extend the resolution limits of lithography. Continuous shrinkage of devices makes overlay accuracy one of the most critical issues while overlay performance is completely dependent on exposure tool. Image Based Overlay (IBO) has been used as the mainstream metrology for overlay by the main memory IC companies, but IBO is not suitable for some critical layers due to the poor Tool Induced Shift (TIS) values. Hence new overlay metrology is required to improve the overlay measurement accuracy. Diffraction Based Overlay (DBO) is regarded to be an alternative metrology to IBO for more accurate measurements and reduction of reading errors. Good overlay performances of DBO have been reported in many articles. However applying DBO for SPT and DPT layers poses extra challenges for target design. New vernier designs are considered for different DPT and SPT schemes to meet overlay target in DBO system. In this paper, we optimize the design of the DBO target and the performance of DBO to meet the overlay specification of sub-3x nm devices which are using SPT and DPT processes. We show that the appropriate vernier design yields excellent overlay performance in residual and TIS. The paper also demonstrated the effects of vernier structure on overlay accuracy from SEM analysis.

  10. Evaluation of a novel ultra small target technology supporting on-product overlay measurements

    NASA Astrophysics Data System (ADS)

    Smilde, Henk-Jan H.; den Boef, Arie; Kubis, Michael; Jak, Martin; van Schijndel, Mark; Fuchs, Andreas; van der Schaar, Maurits; Meyer, Steffen; Morgan, Stephen; Wu, Jon; Tsai, Vincent; Wang, Cathy; Bhattacharyya, Kaustuve; Chen, Kai-Hsiung; Huang, Guo-Tsai; Ke, Chih-Ming; Huang, Jacky

    2012-03-01

    Reducing the size of metrology targets is essential for in-die overlay metrology in advanced semiconductor manufacturing. In this paper, μ-diffraction-based overlay (μDBO) measurements with a YieldStar metrology tool are presented for target-sizes down to 10 × 10 μm2. The μDBO technology enables selection of only the diffraction efficiency information from the grating by efficiently separating it from product structure reflections. Therefore, μDBO targets -even when located adjacent to product environment- give excellent correlation with 40 × 160 μm2 reference targets. Although significantly smaller than standard scribe-line targets, they can achieve total-measurement-uncertainty values of below 0.5 nm on a wide range of product layers. This shows that the new μDBO technique allows for accurate metrology on ultra small in-die targets, while retaining the excellent TMU performance of diffraction-based overlay metrology.

  11. A study of swing-curve physics in diffraction-based overlay

    NASA Astrophysics Data System (ADS)

    Bhattacharyya, Kaustuve; den Boef, Arie; Storms, Greet; van Heijst, Joost; Noot, Marc; An, Kevin; Park, Noh-Kyoung; Jeon, Se-Ra; Oh, Nang-Lyeom; McNamara, Elliott; van de Mast, Frank; Oh, SeungHwa; Lee, Seung Yoon; Hwang, Chan; Lee, Kuntack

    2016-03-01

    With the increase of process complexity in advanced nodes, the requirements of process robustness in overlay metrology continues to tighten. Especially with the introduction of newer materials in the film-stack along with typical stack variations (thickness, optical properties, profile asymmetry etc.), the signal formation physics in diffraction-based overlay (DBO) becomes an important aspect to apply in overlay metrology target and recipe selection. In order to address the signal formation physics, an effort is made towards studying the swing-curve phenomena through wavelength and polarizations on production stacks using simulations as well as experimental technique using DBO. The results provide a wealth of information on target and recipe selection for robustness. Details from simulation and measurements will be reported in this technical publication.

  12. Residual stress determination in an overlay dissimilar welded pipe by neutron diffraction

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Woo, Wan Chuck; Em, Vyacheslav; Hubbard, Camden R

    2011-01-01

    Residual stresses were determined through the thickness of a dissimilar weld overlay pipe using neutron diffraction. The specimen has a complex joining structure consisting of a ferritic steel (SA508), austenitic steel (F316L), Ni-based consumable (Alloy 182), and overlay of Ni-base superalloy (Alloy 52M). It simulates pressurized nozzle components, which have been a critical issue under the severe crack condition of nuclear power reactors. Two neutron diffractometers with different spatial resolutions have been utilized on the identical specimen for comparison. The macroscopic 'stress-free' lattice spacing (d{sub o}) was also obtained from both using a 2-mm width comb-like coupon. The results showmore » significant changes in residual stresses from tension (300-400 MPa) to compression (-600 MPa) through the thickness of the dissimilar weld overlay pipe specimen.« less

  13. Advanced diffraction-based overlay for double patterning

    NASA Astrophysics Data System (ADS)

    Li, Jie; Liu, Yongdong; Dasari, Prasad; Hu, Jiangtao; Smith, Nigel; Kritsun, Oleg; Volkman, Catherine

    2010-03-01

    Diffraction based overlay (DBO) technologies have been developed to address the tighter overlay control challenges as the dimensions of integrated circuit continue to shrink. Several studies published recently have demonstrated that the performance of DBO technologies has the potential to meet the overlay metrology budget for 22nm technology node. However, several hurdles must be cleared before DBO can be used in production. One of the major hurdles is that most DBO technologies require specially designed targets that consist of multiple measurement pads, which consume too much space and increase measurement time. A more advanced spectroscopic ellipsometry (SE) technology-Mueller Matrix SE (MM-SE) is developed to address the challenge. We use a double patterning sample to demonstrate the potential of MM-SE as a DBO candidate. Sample matrix (the matrix that describes the effects of the sample on the incident optical beam) obtained from MM-SE contains up to 16 elements. We show that the Mueller elements from the off-diagonal 2x2 blocks respond to overlay linearly and are zero when overlay errors are absent. This superior property enables empirical DBO (eDBO) using two pads per direction. Furthermore, the rich information in Mueller matrix and its direct response to overlay make it feasible to extract overlay errors from only one pad per direction using modeling approach (mDBO). We here present the Mueller overlay results using both eDBO and mDBO and compare the results with image-based overlay (IBO) and CD-SEM results. We also report the tool induced shifts (TIS) and dynamic repeatability.

  14. Diffraction based overlay re-assessed

    NASA Astrophysics Data System (ADS)

    Leray, Philippe; Laidler, David; D'havé, Koen; Cheng, Shaunee

    2011-03-01

    In recent years, numerous authors have reported the advantages of Diffraction Based Overlay (DBO) over Image Based Overlay (IBO), mainly by comparison of metrology figures of merit such as TIS and TMU. Some have even gone as far as to say that DBO is the only viable overlay metrology technique for advanced technology nodes; 22nm and beyond. Typically the only reported drawback of DBO is the size of the required targets. This severely limits its effective use, when all critical layers of a product, including double patterned layers need to be measured, and in-die overlay measurements are required. In this paper we ask whether target size is the only limitation to the adoption of DBO for overlay characterization and control, or are there other metrics, which need to be considered. For example, overlay accuracy with respect to scanner baseline or on-product process overlay control? In this work, we critically re-assess the strengths and weaknesses of DBO for the applications of scanner baseline and on-product process layer overlay control. A comprehensive comparison is made to IBO. For on product process layer control we compare the performance on critical process layers; Gate, Contact and Metal. In particularly we focus on the response of the scanner to the corrections determined by each metrology technique for each process layer, as a measure of the accuracy. Our results show that to characterize an overlay metrology technique that is suitable for use in advanced technology nodes requires much more than just evaluating the conventional metrology metrics of TIS and TMU.

  15. 64nm pitch metal1 double patterning metrology: CD and OVL control by SEMCD, image based overlay and diffraction based overlay

    NASA Astrophysics Data System (ADS)

    Ducoté, Julien; Dettoni, Florent; Bouyssou, Régis; Le-Gratiet, Bertrand; Carau, Damien; Dezauzier, Christophe

    2015-03-01

    Patterning process control of advanced nodes has required major changes over the last few years. Process control needs of critical patterning levels since 28nm technology node is extremely aggressive showing that metrology accuracy/sensitivity must be finely tuned. The introduction of pitch splitting (Litho-Etch-Litho-Etch) at 14FDSOInm node requires the development of specific metrologies to adopt advanced process control (for CD, overlay and focus corrections). The pitch splitting process leads to final line CD uniformities that are a combination of the CD uniformities of the two exposures, while the space CD uniformities are depending on both CD and OVL variability. In this paper, investigations of CD and OVL process control of 64nm minimum pitch at Metal1 level of 14FDSOI technology, within the double patterning process flow (Litho, hard mask etch, line etch) are presented. Various measurements with SEMCD tools (Hitachi), and overlay tools (KT for Image Based Overlay - IBO, and ASML for Diffraction Based Overlay - DBO) are compared. Metrology targets are embedded within a block instanced several times within the field to perform intra-field process variations characterizations. Specific SEMCD targets were designed for independent measurement of both line CD (A and B) and space CD (A to B and B to A) for each exposure within a single measurement during the DP flow. Based on those measurements correlation between overlay determined with SEMCD and with standard overlay tools can be evaluated. Such correlation at different steps through the DP flow is investigated regarding the metrology type. Process correction models are evaluated with respect to the measurement type and the intra-field sampling.

  16. Achieving optimum diffraction based overlay performance

    NASA Astrophysics Data System (ADS)

    Leray, Philippe; Laidler, David; Cheng, Shaunee; Coogans, Martyn; Fuchs, Andreas; Ponomarenko, Mariya; van der Schaar, Maurits; Vanoppen, Peter

    2010-03-01

    Diffraction Based Overlay (DBO) metrology has been shown to have significantly reduced Total Measurement Uncertainty (TMU) compared to Image Based Overlay (IBO), primarily due to having no measurable Tool Induced Shift (TIS). However, the advantages of having no measurable TIS can be outweighed by increased susceptibility to WIS (Wafer Induced Shift) caused by target damage, process non-uniformities and variations. The path to optimum DBO performance lies in having well characterized metrology targets, which are insensitive to process non-uniformities and variations, in combination with optimized recipes which take advantage of advanced DBO designs. In this work we examine the impact of different degrees of process non-uniformity and target damage on DBO measurement gratings and study their impact on overlay measurement accuracy and precision. Multiple wavelength and dual polarization scatterometry are used to characterize the DBO design performance over the range of process variation. In conclusion, we describe the robustness of DBO metrology to target damage and show how to exploit the measurement capability of a multiple wavelength, dual polarization scatterometry tool to ensure the required measurement accuracy for current and future technology nodes.

  17. Hybrid overlay metrology for high order correction by using CDSEM

    NASA Astrophysics Data System (ADS)

    Leray, Philippe; Halder, Sandip; Lorusso, Gian; Baudemprez, Bart; Inoue, Osamu; Okagawa, Yutaka

    2016-03-01

    Overlay control has become one of the most critical issues for semiconductor manufacturing. Advanced lithographic scanners use high-order corrections or correction per exposure to reduce the residual overlay. It is not enough in traditional feedback of overlay measurement by using ADI wafer because overlay error depends on other process (etching process and film stress, etc.). It needs high accuracy overlay measurement by using AEI wafer. WIS (Wafer Induced Shift) is the main issue for optical overlay, IBO (Image Based Overlay) and DBO (Diffraction Based Overlay). We design dedicated SEM overlay targets for dual damascene process of N10 by i-ArF multi-patterning. The pattern is same as device-pattern locally. Optical overlay tools select segmented pattern to reduce the WIS. However segmentation has limit, especially the via-pattern, for keeping the sensitivity and accuracy. We evaluate difference between the viapattern and relaxed pitch gratings which are similar to optical overlay target at AEI. CDSEM can estimate asymmetry property of target from image of pattern edge. CDSEM can estimate asymmetry property of target from image of pattern edge. We will compare full map of SEM overlay to full map of optical overlay for high order correction ( correctables and residual fingerprints).

  18. Backscattered electron simulations to evaluate sensitivity against electron dosage of buried semiconductor features

    NASA Astrophysics Data System (ADS)

    Mukhtar, Maseeh; Thiel, Bradley

    2018-03-01

    In fabrication, overlay measurements of semiconductor device patterns have conventionally been performed using optical methods. Beginning with image-based techniques using box-in-box to the more recent diffraction-based overlay (DBO). Alternatively, use of SEM overlay is under consideration for in-device overlay. Two main application spaces are measurement features from multiple mask levels on the same surface and buried features. Modern CD-SEMs are adept at measuring overlay for cases where all features are on the surface. In order to measure overlay of buried features, HV-SEM is needed. Gate-to-fin and BEOL overlay are important use cases for this technique. A JMONSEL simulation exercise was performed for these two cases using 10 nm line/space gratings of graduated increase in depth of burial. Backscattered energy loss results of these simulations were used to calculate the sensitivity measurements of buried features versus electron dosage for an array of electron beam voltages.

  19. Faster diffraction-based overlay measurements with smaller targets using 3D gratings

    NASA Astrophysics Data System (ADS)

    Li, Jie; Kritsun, Oleg; Liu, Yongdong; Dasari, Prasad; Volkman, Catherine; Hu, Jiangtao

    2012-03-01

    Diffraction-based overlay (DBO) technologies have been developed to address the overlay metrology challenges for 22nm technology node and beyond. Most DBO technologies require specially designed targets that consist of multiple measurement pads, which consume too much space and increase measurement time. The traditional empirical approach (eDBO) using normal incidence spectroscopic reflectometry (NISR) relies on linear response of the reflectance with respect to overlay displacement within a small range. It offers convenience of quick recipe setup since there is no need to establish a model. However it requires three or four pads per direction (x or y) which adds burden to throughput and target size. Recent advances in modeling capability and computation power enabled mDBO, which allows overlay measurement with reduced number of pads, thus reducing measurement time and DBO target space. In this paper we evaluate the performance of single pad mDBO measurements using two 3D targets that have different grating shapes: squares in boxes and L-shapes in boxes. Good overlay sensitivities are observed for both targets. The correlation to programmed shifts and image-based overlay (IBO) is excellent. Despite the difference in shapes, the mDBO results are comparable for square and L-shape targets. The impact of process variations on overlay measurements is studied using a focus and exposure matrix (FEM) wafer. Although the FEM wafer has larger process variations, the correlation of mDBO results with IBO measurements is as good as the normal process wafer. We demonstrate the feasibility of single pad DBO measurements with faster throughput and smaller target size, which is particularly important in high volume manufacturing environment.

  20. Overlay accuracy fundamentals

    NASA Astrophysics Data System (ADS)

    Kandel, Daniel; Levinski, Vladimir; Sapiens, Noam; Cohen, Guy; Amit, Eran; Klein, Dana; Vakshtein, Irina

    2012-03-01

    Currently, the performance of overlay metrology is evaluated mainly based on random error contributions such as precision and TIS variability. With the expected shrinkage of the overlay metrology budget to < 0.5nm, it becomes crucial to include also systematic error contributions which affect the accuracy of the metrology. Here we discuss fundamental aspects of overlay accuracy and a methodology to improve accuracy significantly. We identify overlay mark imperfections and their interaction with the metrology technology, as the main source of overlay inaccuracy. The most important type of mark imperfection is mark asymmetry. Overlay mark asymmetry leads to a geometrical ambiguity in the definition of overlay, which can be ~1nm or less. It is shown theoretically and in simulations that the metrology may enhance the effect of overlay mark asymmetry significantly and lead to metrology inaccuracy ~10nm, much larger than the geometrical ambiguity. The analysis is carried out for two different overlay metrology technologies: Imaging overlay and DBO (1st order diffraction based overlay). It is demonstrated that the sensitivity of DBO to overlay mark asymmetry is larger than the sensitivity of imaging overlay. Finally, we show that a recently developed measurement quality metric serves as a valuable tool for improving overlay metrology accuracy. Simulation results demonstrate that the accuracy of imaging overlay can be improved significantly by recipe setup optimized using the quality metric. We conclude that imaging overlay metrology, complemented by appropriate use of measurement quality metric, results in optimal overlay accuracy.

  1. Application of advanced diffraction based optical metrology overlay capabilities for high-volume manufacturing

    NASA Astrophysics Data System (ADS)

    Chen, Kai-Hsiung; Huang, Guo-Tsai; Hsieh, Hung-Chih; Ni, Wei-Feng; Chuang, S. M.; Chuang, T. K.; Ke, Chih-Ming; Huang, Jacky; Rao, Shiuan-An; Cumurcu Gysen, Aysegul; d'Alfonso, Maxime; Yueh, Jenny; Izikson, Pavel; Soco, Aileen; Wu, Jon; Nooitgedagt, Tjitte; Ottens, Jeroen; Kim, Yong Ho; Ebert, Martin

    2017-03-01

    On-product overlay requirements are becoming more challenging with every next technology node due to the continued decrease of the device dimensions and process tolerances. Therefore, current and future technology nodes require demanding metrology capabilities such as target designs that are robust towards process variations and high overlay measurement density (e.g. for higher order process corrections) to enable advanced process control solutions. The impact of advanced control solutions based on YieldStar overlay data is being presented in this paper. Multi patterning techniques are applied for critical layers and leading to additional overlay measurement demands. The use of 1D process steps results in the need of overlay measurements relative to more than one layer. Dealing with the increased number of overlay measurements while keeping the high measurement density and metrology accuracy at the same time presents a challenge for high volume manufacturing (HVM). These challenges are addressed by the capability to measure multi-layer targets with the recently introduced YieldStar metrology tool, YS350. On-product overlay results of such multi-layers and standard targets are presented including measurement stability performance.

  2. Overlay accuracy with respect to device scaling

    NASA Astrophysics Data System (ADS)

    Leray, Philippe; Laidler, David; Cheng, Shaunee

    2012-03-01

    Overlay metrology performance is usually reported as repeatability, matching between tools or optics aberrations distorting the measurement (Tool induced shift or TIS). Over the last few years, improvement of these metrics by the tool suppliers has been impressive. But, what about accuracy? Using different target types, we have already reported small differences in the mean value as well as fingerprint [1]. These differences make the correctables questionable. Which target is correct and therefore which translation, scaling etc. values should be fed back to the scanner? In this paper we investigate the sources of these differences, using several approaches. First, we measure the response of different targets to offsets programmed in a test vehicle. Second, we check the response of the same overlay targets to overlay errors programmed into the scanner. We compare overlay target designs; what is the contribution of the size of the features that make up the target? We use different overlay measurement techniques; is DBO (Diffraction Based Overlay) more accurate than IBO (Image Based Overlay)? We measure overlay on several stacks; what is the stack contribution to inaccuracy? In conclusion, we offer an explanation for the observed differences and propose a solution to reduce them.

  3. SEM based overlay measurement between resist and buried patterns

    NASA Astrophysics Data System (ADS)

    Inoue, Osamu; Okagawa, Yutaka; Hasumi, Kazuhisa; Shao, Chuanyu; Leray, Philippe; Lorusso, Gian; Baudemprez, Bart

    2016-03-01

    With the continuous shrink in pattern size and increased density, overlay control has become one of the most critical issues in semiconductor manufacturing. Recently, SEM based overlay of AEI (After Etch Inspection) wafer has been used for reference and optimization of optical overlay (both Image Based Overlay (IBO) and Diffraction Based Overlay (DBO)). Overlay measurement at AEI stage contributes monitor and forecast the yield after formation by etch and calibrate optical measurement tools. however those overlay value seems difficult directly for feedback to a scanner. Therefore, there is a clear need to have SEM based overlay measurements of ADI (After Develop Inspection) wafers in order to serve as reference for optical overlay and make necessary corrections before wafers go to etch. Furthermore, to make the corrections as accurate as possible, actual device like feature dimensions need to be measured post ADI. This device size measurement is very unique feature of CDSEM , which can be measured with smaller area. This is currently possible only with the CD-SEM. This device size measurement is very unique feature of CD-SEM , which can be measured with smaller area. In this study, we assess SEM based overlay measurement of ADI and AEI wafer by using a sample from an N10 process flow. First, we demonstrate SEM based overlay performance at AEI by using dual damascene process for Via 0 (V0) and metal 1 (M1) layer. We also discuss the overlay measurements between litho-etch-litho stages of a triple patterned M1 layer and double pattern V0. Second, to illustrate the complexities in image acquisition and measurement we will measure overlay between M1B resist and buried M1A-Hard mask trench. Finally, we will show how high accelerating voltage can detect buried pattern information by BSE (Back Scattering Electron). In this paper we discuss the merits of this method versus standard optical metrology based corrections.

  4. A complete methodology towards accuracy and lot-to-lot robustness in on-product overlay metrology using flexible wavelength selection

    NASA Astrophysics Data System (ADS)

    Bhattacharyya, Kaustuve; den Boef, Arie; Noot, Marc; Adam, Omer; Grzela, Grzegorz; Fuchs, Andreas; Jak, Martin; Liao, Sax; Chang, Ken; Couraudon, Vincent; Su, Eason; Tzeng, Wilson; Wang, Cathy; Fouquet, Christophe; Huang, Guo-Tsai; Chen, Kai-Hsiung; Wang, Y. C.; Cheng, Kevin; Ke, Chih-Ming; Terng, L. G.

    2017-03-01

    The optical coupling between gratings in diffraction-based overlay triggers a swing-curve1,6 like response of the target's signal contrast and overlay sensitivity through measurement wavelengths and polarizations. This means there are distinct measurement recipes (wavelength and polarization combinations) for a given target where signal contrast and overlay sensitivity are located at the optimal parts of the swing-curve that can provide accurate and robust measurements. Some of these optimal recipes can be the ideal choices of settings for production. The user has to stay away from the non-optimal recipe choices (that are located on the undesirable parts of the swing-curve) to avoid possibilities to make overlay measurement error that can be sometimes (depending on the amount of asymmetry and stack) in the order of several "nm". To accurately identify these optimum operating areas of the swing-curve during an experimental setup, one needs to have full-flexibility in wavelength and polarization choices. In this technical publication, a diffraction-based overlay (DBO) measurement tool with many choices of wavelengths and polarizations is utilized on advanced production stacks to study swing-curves. Results show that depending on the stack and the presence of asymmetry, the swing behavior can significantly vary and a solid procedure is needed to identify a recipe during setup that is robust against variations in stack and grating asymmetry. An approach is discussed on how to use this knowledge of swing-curve to identify recipe that is not only accurate at setup, but also robust over the wafer, and wafer-to-wafer. KPIs are reported in run-time to ensure the quality / accuracy of the reading (basically acting as an error bar to overlay measurement).

  5. Evaluating diffraction-based overlay

    NASA Astrophysics Data System (ADS)

    Li, Jie; Tan, Asher; Jung, JinWoo; Goelzer, Gary; Smith, Nigel; Hu, Jiangtao; Ham, Boo-Hyun; Kwak, Min-Cheol; Kim, Cheol-Hong; Nam, Suk-Woo

    2012-03-01

    We evaluate diffraction-based overlay (DBO) metrology using two test wafers. The test wafers have different film stacks designed to test the quality of DBO data under a range of film conditions. We present DBO results using traditional empirical approach (eDBO). eDBO relies on linear response of the reflectance with respect to the overlay displacement within a small range. It requires specially designed targets that consist of multiple pads with programmed shifts. It offers convenience of quick recipe setup since there is no need to establish a model. We measure five DBO targets designed with different pitches and programmed shifts. The correlations of five eDBO targets and the correlation of eDBO to image-based overlay are excellent. The targets of 800nm and 600nm pitches have better dynamic precision than targets of 400nm pitch, which agrees with simulated results on signal/noise ratio. 3σ of less than 0.1nm is achieved for both wafers using the best configured targets. We further investigate the linearity assumption of eDBO algorithm. Simulation results indicate that as the pitch of DBO targets gets smaller, the nonlinearity error, i.e., the error in the overlay measurement results caused by deviation from ideal linear response, becomes bigger. We propose a nonlinearity correction (NLC) by including higher order terms in the optical response. The new algorithm with NLC improves measurement consistency for DBO targets of same pitch but different programmed shift, due to improved accuracy. The results from targets with different pitches, however, are improved marginally, indicating the presence of other error sources.

  6. High order field-to-field corrections for imaging and overlay to achieve sub 20-nm lithography requirements

    NASA Astrophysics Data System (ADS)

    Mulkens, Jan; Kubis, Michael; Hinnen, Paul; de Graaf, Roelof; van der Laan, Hans; Padiy, Alexander; Menchtchikov, Boris

    2013-04-01

    Immersion lithography is being extended to the 20-nm and 14-nm node and the lithography performance requirements need to be tightened further to enable this shrink. In this paper we present an integral method to enable high-order fieldto- field corrections for both imaging and overlay, and we show that this method improves the performance with 20% - 50%. The lithography architecture we build for these higher order corrections connects the dynamic scanner actuators with the angle resolved scatterometer via a separate application server. Improvements of CD uniformity are based on enabling the use of freeform intra-field dose actuator and field-to-field control of focus. The feedback control loop uses CD and focus targets placed on the production mask. For the overlay metrology we use small in-die diffraction based overlay targets. Improvements of overlay are based on using the high order intra-field correction actuators on a field-tofield basis. We use this to reduce the machine matching error, extending the heating control and extending the correction capability for process induced errors.

  7. Overlay metrology for double patterning processes

    NASA Astrophysics Data System (ADS)

    Leray, Philippe; Cheng, Shaunee; Laidler, David; Kandel, Daniel; Adel, Mike; Dinu, Berta; Polli, Marco; Vasconi, Mauro; Salski, Bartlomiej

    2009-03-01

    The double patterning (DPT) process is foreseen by the industry to be the main solution for the 32 nm technology node and even beyond. Meanwhile process compatibility has to be maintained and the performance of overlay metrology has to improve. To achieve this for Image Based Overlay (IBO), usually the optics of overlay tools are improved. It was also demonstrated that these requirements are achievable with a Diffraction Based Overlay (DBO) technique named SCOLTM [1]. In addition, we believe that overlay measurements with respect to a reference grid are required to achieve the required overlay control [2]. This induces at least a three-fold increase in the number of measurements (2 for double patterned layers to the reference grid and 1 between the double patterned layers). The requirements of process compatibility, enhanced performance and large number of measurements make the choice of overlay metrology for DPT very challenging. In this work we use different flavors of the standard overlay metrology technique (IBO) as well as the new technique (SCOL) to address these three requirements. The compatibility of the corresponding overlay targets with double patterning processes (Litho-Etch-Litho-Etch (LELE); Litho-Freeze-Litho-Etch (LFLE), Spacer defined) is tested. The process impact on different target types is discussed (CD bias LELE, Contrast for LFLE). We compare the standard imaging overlay metrology with non-standard imaging techniques dedicated to double patterning processes (multilayer imaging targets allowing one overlay target instead of three, very small imaging targets). In addition to standard designs already discussed [1], we investigate SCOL target designs specific to double patterning processes. The feedback to the scanner is determined using the different techniques. The final overlay results obtained are compared accordingly. We conclude with the pros and cons of each technique and suggest the optimal metrology strategy for overlay control in double patterning processes.

  8. Hybrid overlay metrology with CDSEM in a BEOL patterning scheme

    NASA Astrophysics Data System (ADS)

    Leray, Philippe; Jehoul, Christiane; Inoue, Osamu; Okagawa, Yutaka

    2015-03-01

    Overlay metrology accuracy is a major concern for our industry. Advanced logic process require more tighter overlay control for multipatterning schemes. TIS (Tool Induced Shift) and WIS (Wafer Induced Shift) are the main issues for IBO (Image Based Overlay) and DBO (Diffraction Based Overlay). Methods of compensation have been introduced, some are even very efficient to reduce these measured offsets. Another related question is about the overlay target designs. These targets are never fully representative of the design rules, strong efforts have been achieved, but the device cannot be completely duplicated. Ideally, we would like to measure in the device itself to verify the real overlay value. Top down CDSEM can measure critical dimensions of any structure, it is not dependent of specific target design. It can also measure the overlay errors but only in specific cases like LELE (Litho Etch Litho Etch) after final patterning. In this paper, we will revisit the capability of the CDSEM at final patterning by measuring overlay in dedicated targets as well as inside a logic and an SRAM design. In the dedicated overlay targets, we study the measurement differences between design rules gratings and relaxed pitch gratings. These relaxed pitch which are usually used in IBO or DBO targets. Beyond this "simple" LELE case, we will explore the capability of the CDSEM to measure overlay even if not at final patterning, at litho level. We will assess the hybridization of DBO and CDSEM for reference to optical tools after final patterning. We will show that these reference data can be used to validate the DBO overlay results (correctables and residual fingerprints).

  9. Advancements of diffraction-based overlay metrology for double patterning

    NASA Astrophysics Data System (ADS)

    Li, Jie; Kritsun, Oleg; Liu, Yongdong; Dasari, Prasad; Weher, Ulrich; Volkman, Catherine; Mazur, Martin; Hu, Jiangtao

    2011-03-01

    As the dimensions of integrated circuit continue to shrink, diffraction based overlay (DBO) technologies have been developed to address the tighter overlay control challenges. Previously data of high accuracy and high precision were reported for litho-etch-litho-etch double patterning (DP) process using normal incidence spectroscopic reflectometry on specially designed targets composed of 1D gratings in x and y directions. Two measurement methods, empirical algorithm (eDBO) using four pads per direction (2x4 target) and modeling based algorithm (mDBO) using two pads per direction (2x2 target) were performed. In this work, we apply DBO techniques to measure overlay errors for a different DP process, litho-freeze-litho-etch process. We explore the possibility of further reducing number of pads in a DBO target using mDBO. For standard targets composed of 1D gratings, we reported results for eDBO 2x4 targets, mDBO 2x2 targets, and mDBO 2x1 target. The results of all three types of targets are comparable in terms of accuracy, dynamic precision, and TIS. TMU (not including tool matching) is less than 0.1nm. In addition, we investigated the possibility of measuring overlay with one single pad that contains 2D gratings. We achieved good correlation to blossom measurements. TMU (not including tool matching) is ~ 0.2nm. To our best knowledge, this is the first time that DBO results are reported on a single pad. eDBO allows quick recipe setup but takes more space and measurement time. Although mDBO needs details of optical properties and modeling, it offers smaller total target size and much faster throughput, which is important in high volume manufacturing environment.

  10. Reduction of image-based ADI-to-AEI overlay inconsistency with improved algorithm

    NASA Astrophysics Data System (ADS)

    Chen, Yen-Liang; Lin, Shu-Hong; Chen, Kai-Hsiung; Ke, Chih-Ming; Gau, Tsai-Sheng

    2013-04-01

    In image-based overlay (IBO) measurement, the measurement quality of various measurement spectra can be judged by quality indicators and also the ADI-to-AEI similarity to determine the optimum light spectrum. However we found some IBO measured results showing erroneous indication of wafer expansion from the difference between the ADI and the AEI maps, even after their measurement spectra were optimized. To reduce this inconsistency, an improved image calculation algorithm is proposed in this paper. Different gray levels composed of inner- and outer-box contours are extracted to calculate their ADI overlay errors. The symmetry of intensity distribution at the thresholds dictated by a range of gray levels is used to determine the particular gray level that can minimize the ADI-to-AEI overlay inconsistency. After this improvement, the ADI is more similar to AEI with less expansion difference. The same wafer was also checked by the diffraction-based overlay (DBO) tool to verify that there is no physical wafer expansion. When there is actual wafer expansion induced by large internal stress, both the IBO and the DBO measurements indicate similar expansion results. The scanning white-light interference microscope was used to check the variation of wafer warpage during the ADI and AEI stages. It predicts a similar trend with the overlay difference map, confirming the internal stress.

  11. Study of μDBO overlay target size reduction for application broadening

    NASA Astrophysics Data System (ADS)

    Calado, Victor; Dépré, Jérôme; Massacrier, Clément; Tarabrin, Sergey; van Haren, Richard; Dettoni, Florent; Bouyssou, Régis; Dezauzier, Christophe

    2018-03-01

    With these proceedings we present μ-diffraction-based overlay (μDBO) targets that are well below the currently supported minimum size of 10×10 μm2 . We have been capable of measuring overlay targets as small as 4×4 μm2 with our latest generation YieldStar system. Furthermore we find an excellent precision (TMU < 0.33 nm for 6 × 6 μm2 ) without any compromise on throughput (MAM time < 60 ms). At last a study that compares four generations of YieldStar systems show clearly that the latest generation YieldStar systems is much better capable of reading small overlay targets such that the performance of a 16 × 16 μm2 on an early generation YieldStar 2nd-gen is comparable to that of a 8 × 8 μm2 on the latest YieldStar 5th-gen. This work enables a smaller metrology footprint, more placement flexibility and in-die overlay metrology solutions.

  12. Improvement of CD-SEM mark position measurement accuracy

    NASA Astrophysics Data System (ADS)

    Kasa, Kentaro; Fukuhara, Kazuya

    2014-04-01

    CD-SEM is now attracting attention as a tool that can accurately measure positional error of device patterns. However, the measurement accuracy can get worse due to pattern asymmetry as in the case of image based overlay (IBO) and diffraction based overlay (DBO). For IBO and DBO, a way of correcting the inaccuracy arising from measurement patterns was suggested. For CD-SEM, although a way of correcting CD bias was proposed, it has not been argued how to correct the inaccuracy arising from pattern asymmetry using CD-SEM. In this study we will propose how to quantify and correct the measurement inaccuracy affected by pattern asymmetry.

  13. Wafer edge overlay control solution for N7 and beyond

    NASA Astrophysics Data System (ADS)

    van Haren, Richard; Calado, Victor; van Dijk, Leon; Hermans, Jan; Kumar, Kaushik; Yamashita, Fumiko

    2018-03-01

    Historically, the on-product overlay performance close to the wafer edge is lagging with respect to the inner part of the wafer. The reason for this is that wafer processing is less controlled close to the wafer edge as opposed to the rest of the wafer. It is generally accepted that Chemical Vapor Deposition (CVD) of stressed layers that cause wafer warp, wafer table contamination, Chemical Mechanical Polishing (CMP), and Reactive Ion Etch (RIE) may deteriorate the overlay performance and/or registration close to the wafer edge. For the N7 technology node and beyond, it is anticipated that the tight on-product overlay specification is required across the full wafer which includes the edge region. In this work, we highlight one contributor that may negatively impact the on-product overlay performance, namely the etch step. The focus will be mainly on the wafer edge region but the remaining part of the wafer is considered as well. Three use-cases are examined: multiple Litho-Etch steps (LEn), contact hole layer etch, and the copper dual damascene etch. We characterize the etch contribution by considering the overlay measurement after resist development inspect (ADI) and after etch inspect (AEI). We show that the Yieldstar diffraction based overlay (μDBO) measurements can be utilized to characterize the etch contribution to the overlay budget. The effects of target asymmetry as well as overlay shifts are considered and compared with SEM measurements. Based on the results above, we propose a control solution aiming to reduce or even eliminate the delta between ADI and AEI. By doing so, target/mark to device offsets due to etch might be avoided.

  14. Reducing the overlay metrology sensitivity to perturbations of the measurement stack

    NASA Astrophysics Data System (ADS)

    Zhou, Yue; Park, DeNeil; Gutjahr, Karsten; Gottipati, Abhishek; Vuong, Tam; Bae, Sung Yong; Stokes, Nicholas; Jiang, Aiqin; Hsu, Po Ya; O'Mahony, Mark; Donini, Andrea; Visser, Bart; de Ruiter, Chris; Grzela, Grzegorz; van der Laan, Hans; Jak, Martin; Izikson, Pavel; Morgan, Stephen

    2017-03-01

    Overlay metrology setup today faces a continuously changing landscape of process steps. During Diffraction Based Overlay (DBO) metrology setup, many different metrology target designs are evaluated in order to cover the full process window. The standard method for overlay metrology setup consists of single-wafer optimization in which the performance of all available metrology targets is evaluated. Without the availability of external reference data or multiwafer measurements it is hard to predict the metrology accuracy and robustness against process variations which naturally occur from wafer-to-wafer and lot-to-lot. In this paper, the capabilities of the Holistic Metrology Qualification (HMQ) setup flow are outlined, in particular with respect to overlay metrology accuracy and process robustness. The significance of robustness and its impact on overlay measurements is discussed using multiple examples. Measurement differences caused by slight stack variations across the target area, called grating imbalance, are shown to cause significant errors in the overlay calculation in case the recipe and target have not been selected properly. To this point, an overlay sensitivity check on perturbations of the measurement stack is presented for improvement of the overlay metrology setup flow. An extensive analysis on Key Performance Indicators (KPIs) from HMQ recipe optimization is performed on µDBO measurements of product wafers. The key parameters describing the sensitivity to perturbations of the measurement stack are based on an intra-target analysis. Using advanced image analysis, which is only possible for image plane detection of μDBO instead of pupil plane detection of DBO, the process robustness performance of a recipe can be determined. Intra-target analysis can be applied for a wide range of applications, independent of layers and devices.

  15. The effect of Sr and Bi on the Si(100) surface oxidation - Auger electron spectroscopy, low energy electron diffraction, and X-ray photoelectron spectroscopy study

    NASA Technical Reports Server (NTRS)

    Fan, W. C.; Mesarwi, A.; Ignatiev, A.

    1990-01-01

    The effect of Sr and Bi on the oxidation of the Si(100) surface has been studied by Auger electron spectroscopy, low electron diffraction, and X-ray photoelectron spectroscopy. A dramatic enhancement, by a factor of 10, of the Si oxidation has been observed for Si(100) with a Sr overlayer. The SR-enhanced Si oxidation has been studied as a function of O2 exposure and Sr coverage. In contrast to the oxidation promotion of Sr on Si, it has been also observed that a Bi overlayer on Si(100) reduced Si oxidation significantly. Sr adsorption on the Si(100) with a Bi overlayer enhances Si oxidation only at Sr coverage of greater than 0.3 ML.

  16. Interaction between U/UO2 bilayers and hydrogen studied by in-situ X-ray diffraction

    NASA Astrophysics Data System (ADS)

    Darnbrough, J. E.; Harker, R. M.; Griffiths, I.; Wermeille, D.; Lander, G. H.; Springell, R.

    2018-04-01

    This paper reports experiments investigating the reaction of H2 with uranium metal-oxide bilayers. The bilayers consist of ≤ 100 nm of epitaxial α-U (grown on a Nb buffer deposited on sapphire) with a UO2 overlayer of thicknesses of between 20 and 80 nm. The oxides were made either by depositing via reactive magnetron sputtering, or allowing the uranium metal to oxidise in air at room temperature. The bilayers were exposed to hydrogen, with sample temperatures between 80 and 200 C, and monitored via in-situ x-ray diffraction and complimentary experiments conducted using Scanning Transmission Electron Microscopy - Electron Energy Loss Spectroscopy (STEM-EELS). Small partial pressures of H2 caused rapid consumption of the U metal and lead to changes in the intensity and position of the diffraction peaks from both the UO2 overlayers and the U metal. There is an orientational dependence in the rate of U consumption. From changes in the lattice parameter we deduce that hydrogen enters both the oxide and metal layers, contracting the oxide and expanding the metal. The air-grown oxide overlayers appear to hinder the H2-reaction up to a threshold dose, but then on heating from 80 to 140 C the consumption is more rapid than for the as-deposited overlayers. STEM-EELS establishes that the U-hydride layer lies at the oxide-metal interface, and that the initial formation is at defects or grain boundaries, and involves the formation of amorphous and/or nanocrystalline UH3. This explains why no diffraction peaks from UH3 are observed.

  17. Scatterometry or imaging overlay: a comparative study

    NASA Astrophysics Data System (ADS)

    Hsu, Simon C. C.; Pai, Yuan Chi; Chen, Charlie; Yu, Chun Chi; Hsing, Henry; Wu, Hsing-Chien; Kuo, Kelly T. L.; Amir, Nuriel

    2015-03-01

    Most fabrication facilities today use imaging overlay measurement methods, as it has been the industry's reliable workhorse for decades. In the last few years, third-generation Scatterometry Overlay (SCOL™) or Diffraction Based Overlay (DBO-1) technology was developed, along another DBO technology (DBO-2). This development led to the question of where the DBO technology should be implemented for overlay measurements. Scatterometry has been adopted for high volume production in only few cases, always with imaging as a backup, but scatterometry overlay is considered by many as the technology of the future. In this paper we compare imaging overlay and DBO technologies by means of measurements and simulations. We outline issues and sensitivities for both technologies, providing guidelines for the best implementation of each. For several of the presented cases, data from two different DBO technologies are compared as well, the first with Pupil data access (DBO-1) and the other without pupil data access (DBO-2). Key indicators of overlay measurement quality include: layer coverage, accuracy, TMU, process robustness and robustness to process changes. Measurement data from real cases across the industry are compared and the conclusions are also backed by simulations. Accuracy is benchmarked with reference OVL, and self-consistency, showing good results for Imaging and DBO-1 technology. Process sensitivity and metrology robustness are mostly simulated with MTD (Metrology Target Designer) comparing the same process variations for both technologies. The experimental data presented in this study was done on ten advanced node layers and three production node layers, for all phases of the IC fabrication process (FEOL, MEOL and BEOL). The metrology tool used for most of the study is KLA-Tencor's Archer 500LCM system (scatterometry-based and imaging-based measurement technologies on the same tool) another type of tool is used for DBO-2 measurements. Finally, we conclude that both imaging overlay technology and DBO-1 technology are fully successful and have a valid roadmap for the next few design nodes, with some use cases better suited for one or the other measurement technologies. Having both imaging and DBO technology options available in parallel, allows Overlay Engineers a mix and match overlay measurement strategy, providing back up when encountering difficulties with one of the technologies and benefiting from the best of both technologies for every use case.

  18. Multi-wavelength approach towards on-product overlay accuracy and robustness

    NASA Astrophysics Data System (ADS)

    Bhattacharyya, Kaustuve; Noot, Marc; Chang, Hammer; Liao, Sax; Chang, Ken; Gosali, Benny; Su, Eason; Wang, Cathy; den Boef, Arie; Fouquet, Christophe; Huang, Guo-Tsai; Chen, Kai-Hsiung; Cheng, Kevin; Lin, John

    2018-03-01

    Success of diffraction-based overlay (DBO) technique1,4,5 in the industry is not just for its good precision and low toolinduced shift, but also for the measurement accuracy2 and robustness that DBO can provide. Significant efforts are put in to capitalize on the potential that DBO has to address measurement accuracy and robustness. Introduction of many measurement wavelength choices (continuous wavelength) in DBO is one of the key new capabilities in this area. Along with the continuous choice of wavelengths, the algorithms (fueled by swing-curve physics) on how to use these wavelengths are of high importance for a robust recipe setup that can avoid the impact from process stack variations (symmetric as well as asymmetric). All these are discussed. Moreover, another aspect of boosting measurement accuracy and robustness is discussed that deploys the capability to combine overlay measurement data from multiple wavelength measurements. The goal is to provide a method to make overlay measurements immune from process stack variations and also to report health KPIs for every measurement. By combining measurements from multiple wavelengths, a final overlay measurement is generated. The results show a significant benefit in accuracy and robustness against process stack variation. These results are supported by both measurement data as well as simulation from many product stacks.

  19. Auger electron diffraction study of the growth of Fe(001) films on ZnSe(001)

    NASA Astrophysics Data System (ADS)

    Jonker, B. T.; Prinz, G. A.

    1991-03-01

    The growth of Fe films on ZnSe(001) epilayers and bulk GaAs(001) substrates has been studied to determine the mode of film growth, the formation of the interface, and the structure of the overlayer at the 1-10 monolayer level. Auger electron diffraction (AED), x-ray photoelectron spectroscopy (XPS), and reflection high-energy electron diffraction data are obtained for incremental deposition of the Fe(001) overlayer. The coverage dependence of the AED forward scattering peaks reveals a predominantly layer-by-layer mode of film growth at 175 °C on ZnSe, while a more three-dimensional growth mode occurs on the oxide-desorbed GaAs(001) substrate. XPS studies of the semiconductor 3d levels indicate that the Fe/ZnSe interface is less reactive than the Fe/GaAs interface.

  20. Magnetic x-ray dichroism in ultrathin epitaxial films

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Tobin, J.G.; Goodman, K.W.; Cummins, T.R.

    1997-04-01

    The authors have used Magnetic X-ray Linear Dichroism (MXLD) and Magnetic X-ray Circular Dichroism (MXCD) to study the magnetic properties of epitaxial overlayers in an elementally specific fashion. Both MXLD and MXCD Photoelectron Spectroscopy were performed in a high resolution mode at the Spectromicroscopy Facility of the ALS. Circular Polarization was obtained via the utilization of a novel phase retarder (soft x-ray quarter wave plate) based upon transmission through a multilayer film. The samples were low temperature Fe overlayers, magnetic alloy films of NiFe and CoNi, and Gd grown on Y. The authors results include a direct comparison of highmore » resolution angle resolved Photoelectron Spectroscopy performed in MXLD and MXCD modes as well as structural studies with photoelectron diffraction.« less

  1. Laboratory manual: mineral X-ray diffraction data retrieval/plot computer program

    USGS Publications Warehouse

    Hauff, Phoebe L.; VanTrump, George

    1976-01-01

    The Mineral X-Ray Diffraction Data Retrieval/Plot Computer Program--XRDPLT (VanTrump and Hauff, 1976a) is used to retrieve and plot mineral X-ray diffraction data. The program operates on a file of mineral powder diffraction data (VanTrump and Hauff, 1976b) which contains two-theta or 'd' values, and intensities, chemical formula, mineral name, identification number, and mineral group code. XRDPLT is a machine-independent Fortran program which operates in time-sharing mode on a DEC System i0 computer and the Gerber plotter (Evenden, 1974). The program prompts the user to respond from a time-sharing terminal in a conversational format with the required input information. The program offers two major options: retrieval only; retrieval and plot. The first option retrieves mineral names, formulas, and groups from the file by identification number, by the mineral group code (a classification by chemistry or structure), or by searches based on the formula components. For example, it enables the user to search for minerals by major groups (i.e., feldspars, micas, amphiboles, oxides, phosphates, carbonates) by elemental composition (i.e., Fe, Cu, AI, Zn), or by a combination of these (i.e., all copper-bearing arsenates). The second option retrieves as the first, but also plots the retrieved 2-theta and intensity values as diagrammatic X-ray powder patterns on mylar sheets or overlays. These plots can be made using scale combinations compatible with chart recorder diffractograms and 114.59 mm powder camera films. The overlays are then used to separate or sieve out unrelated minerals until unknowns are matched and identified.

  2. Electrocatalysis for oxygen electrodes in fuel cells and water electrolyzers for space applications

    NASA Technical Reports Server (NTRS)

    Prakash, Jai; Tryk, Donald; Yeager, Ernest

    1990-01-01

    The lead ruthenate pyrochlore Pb2Ru2O6.5, in both high- and low-area forms, has been characterized using thermogravimetric analysis, X-ray photoelectron spectroscopy, X-ray diffraction, cyclic voltammetry, and O2 reduction and generation kinetic-mechanistic studies. Mechanisms are proposed. Compounds in which part of the Ru is substituted with Ir have also been prepared. They exhibit somewhat better performance for O2 reduction in porous, gas-fed electrodes than the unsubstituted compound. The anodic corrosion resistance of pyrochlore-based porous electrodes was improved by using two different anionically conducting polymer overlayers, which slow down the diffusion of ruthenate and plumbate out of the electrode. The O2 generation performance was improved with both types of electrodes. With a hydrogel overlayer, the O2 reduction performance was also improved.

  3. Near Edge X-Ray Absorption and X-Ray Photoelectron Diffraction Studies of the Structural Environment of Ge-Si Systems

    NASA Astrophysics Data System (ADS)

    Castrucci, P.; Gunnella, R.; Pinto, N.; Bernardini, R.; de Crescenzi, M.; Sacchi, M.

    Near edge X-ray absorption spectroscopy (XAS), X-ray photoelectron diffraction (XPD) and Auger electron diffraction (AED) are powerful techniques for the qualitative study of the structural and electronic properties of several systems. The recent development of a multiple scattering approach to simulating experimental spectra opened a friendly way to the study of structural environments of solids and surfaces. This article reviews recent X-ray absorption experiments using synchrotron radiation which were performed at Ge L edges and core level electron diffraction measurements obtained using a traditional X-ray source from Ge core levels for ultrathin Ge films deposited on silicon substrates. Thermodynamics and surface reconstruction have been found to play a crucial role in the first stages of Ge growth on Si(001) and Si(111) surfaces. Both techniques show the occurrence of intermixing processes even for room-temperature-grown Ge/Si(001) samples and give a straightforward measurement of the overlayer tetragonal distortion. The effects of Sb as a surfactant on the Ge/Si(001) interface have also been investigated. In this case, evidence of layer-by-layer growth of the fully strained Ge overlayer with a reduced intermixing is obtained when one monolayer of Sb is predeposited on the surface.

  4. Enhacement of intrafield overlay using a design based metrology system

    NASA Astrophysics Data System (ADS)

    Jo, Gyoyeon; Ji, Sunkeun; Kim, Shinyoung; Kang, Hyunwoo; Park, Minwoo; Kim, Sangwoo; Kim, Jungchan; Park, Chanha; Yang, Hyunjo; Maruyama, Kotaro; Park, Byungjun

    2016-03-01

    As the scales of the semiconductor devices continue to shrink, accurate measurement and control of the overlay have been emphasized for securing more overlay margin. Conventional overlay analysis methods are based on the optical measurement of the overlay mark. However, the overlay data obtained from these optical methods cannot represent the exact misregistration between two layers at the circuit level. The overlay mismatch may arise from the size or pitch difference between the overlay mark and the real pattern. Pattern distortion, caused by CMP or etching, could be a source of the overlay mismatch as well. Another issue is the overlay variation in the real circuit pattern which varies depending on its location. The optical overlay measurement methods, such as IBO and DBO that use overlay mark on the scribeline, are not capable of defining the exact overlay values of the real circuit. Therefore, the overlay values of the real circuit need to be extracted to integrate the semiconductor device properly. The circuit level overlay measurement using CDSEM is time-consuming in extracting enough data to indicate overall trend of the chip. However DBM tool is able to derive sufficient data to display overlay tendency of the real circuit region with high repeatability. An E-beam based DBM(Design Based Metrology) tool can be an alternative overlay measurement method. In this paper, we are going to certify that the overlay values extracted from optical measurement cannot represent the circuit level overlay values. We will also demonstrate the possibility to correct misregistration between two layers using the overlay data obtained from the DBM system.

  5. A new approach to pattern metrology

    NASA Astrophysics Data System (ADS)

    Ausschnitt, Christopher P.

    2004-05-01

    We describe an approach to pattern metrology that enables the simultaneous determination of critical dimensions, overlay and film thickness. A single optical system captures nonzero- and zero-order diffracted signals from illuminated grating targets, as well as unpatterned regions of the surrounding substrate. Differential targets provide in situ dimensional calibration. CD target signals are analyzed to determine average dimension, profile attributes, and effective dose and defocus. In turn, effective dose and defocus determines all CDs pre-correlated to the dose and focus settings of the exposure tool. Overlay target signals are analyzed to determine the relative reflectivity of the layer pair and the overlay error between them. Compared to commercially available pattern metrology (SEM, optical microscopy, AFM, scatterometry and schnitzlometry), our approach promises improved signal-to-noise, higher throughput and smaller targets. We have dubbed this optical chimera MOXIE (Metrology Of eXtremely Irrational Exuberance).

  6. Surface crystallographic structures of cellulose nanofiber films and overlayers of pentacene

    NASA Astrophysics Data System (ADS)

    Nakayama, Yasuo; Mori, Toshiaki; Tsuruta, Ryohei; Yamanaka, Soichiro; Yoshida, Koki; Imai, Kento; Koganezawa, Tomoyuki; Hosokai, Takuya

    2018-03-01

    Cellulose nanofibers or nanocellulose is a promising recently developed biomass and biodegradable material used for various applications. In order to utilize this material as a substrate in organic electronic devices, thorough understanding of the crystallographic structures of the surfaces of the nanocellulose composites and of their interfaces with organic semiconductor molecules is essential. In this work, surface crystallographic structures of nanocellulose films (NCFs) and overlayers of pentacene were investigated by two-dimensional grazing-incidence X-ray diffraction. The NCFs are found to crystallize on solid surfaces with the crystal lattice preserving the same structure of the known bulk phase, whereas distortion of interchain packing toward the surface normal direction is suggested. The pentacene overlayers on the NCFs are found to form the thin-film phase with an in-plane mean crystallite size of over 10 nm.

  7. Structure analysis of the single-domain Si(111)4 × 1-In surface by μ-probe Auger electron diffraction and μ-probe reflection high energy electron diffraction

    NASA Astrophysics Data System (ADS)

    Nakamura, N.; Anno, K.; Kono, S.

    1991-10-01

    A single-domain Si(111)4 × 1-In surface has been studied by μ-probe reflection high-energy electron diffraction (RHEED) to elucidate the symmetry of the 4 × 1 surface. Azimuthal diffraction patterns of In MNN Auger electron have been obtained by a μ-probe Auger electron diffraction (AED) apparatus from the single-domain Si(111)4 × 1-In surface. On the basis of information from scanning tunneling microscopy [J. Microsc. 152 (1988) 727] and under the assumption that the 4 × 1 surface is composed of In-overlayers, the μ-probe AED patterns were kinematically analyzed to reach a concrete model of indium arrangement.

  8. Simultaneous overlay and CD measurement for double patterning: scatterometry and RCWA approach

    NASA Astrophysics Data System (ADS)

    Li, Jie; Liu, Zhuan; Rabello, Silvio; Dasari, Prasad; Kritsun, Oleg; Volkman, Catherine; Park, Jungchul; Singh, Lovejeet

    2009-03-01

    As optical lithography advances to 32 nm technology node and beyond, double patterning technology (DPT) has emerged as an attractive solution to circumvent the fundamental optical limitations. DPT poses unique demands on critical dimension (CD) uniformity and overlay control, making the tolerance decrease much faster than the rate at which critical dimension shrinks. This, in turn, makes metrology even more challenging. In the past, multi-pad diffractionbased overlay (DBO) using empirical approach has been shown to be an effective approach to measure overlay error associated with double patterning [1]. In this method, registration errors for double patterning were extracted from specially designed diffraction targets (three or four pads for each direction); CD variation is assumed negligible within each group of adjacent pads and not addressed in the measurement. In another paper, encouraging results were reported with a first attempt at simultaneously extracting overlay and CD parameters using scatterometry [2]. In this work, we apply scatterometry with a rigorous coupled wave analysis (RCWA) approach to characterize two double-patterning processes: litho-etch-litho-etch (LELE) and litho-freeze-litho-etch (LFLE). The advantage of performing rigorous modeling is to reduce the number of pads within each measurement target, thus reducing space requirement and improving throughput, and simultaneously extract CD and overlay information. This method measures overlay errors and CDs by fitting the optical signals with spectra calculated from a model of the targets. Good correlation is obtained between the results from this method and that of several reference techniques, including empirical multi-pad DBO, CD-SEM, and IBO. We also perform total measurement uncertainty (TMU) analysis to evaluate the overall performance. We demonstrate that scatterometry provides a promising solution to meet the challenging overlay metrology requirement in DPT.

  9. Residual stresses in continuous graphite fiber Al metal matrix composites

    NASA Technical Reports Server (NTRS)

    Park, Hun Sub; Zong, Gui Sheng; Marcus, Harris L.

    1988-01-01

    The residual stresses in graphite fiber reinforced aluminum (Gr/Al) composites with various thermal histories are measured using X-ray diffraction (XRD) methods. The XRD stress analysis is based on the determination of lattice strains by precise measurements of the interplanar spacings in different directions of the sample. The sample is a plate consisting of two-ply P 100 Gr/Al 6061 precursor wires and Al 6061 overlayers. Prior to XRD measurement, the 6061 overlayers are electrochemically removed. In order to calibrate the relationship between stress magnitude and lattice spacing shift, samples of Al 6061 are loaded at varying stress levels in a three-point bend fixture, while the stresses are simultaneously determined by XRD and surface-attached strain gages. The stresses determined by XRD closely match those determined by the strain gages. Using these calibrations, the longitudinal residual stresses of P 100 Gr/Al 6061 composites are measured for various heat treatments, and the results are presented.

  10. Improving scanner wafer alignment performance by target optimization

    NASA Astrophysics Data System (ADS)

    Leray, Philippe; Jehoul, Christiane; Socha, Robert; Menchtchikov, Boris; Raghunathan, Sudhar; Kent, Eric; Schoonewelle, Hielke; Tinnemans, Patrick; Tuffy, Paul; Belen, Jun; Wise, Rich

    2016-03-01

    In the process nodes of 10nm and below, the patterning complexity along with the processing and materials required has resulted in a need to optimize alignment targets in order to achieve the required precision, accuracy and throughput performance. Recent industry publications on the metrology target optimization process have shown a move from the expensive and time consuming empirical methodologies, towards a faster computational approach. ASML's Design for Control (D4C) application, which is currently used to optimize YieldStar diffraction based overlay (DBO) metrology targets, has been extended to support the optimization of scanner wafer alignment targets. This allows the necessary process information and design methodology, used for DBO target designs, to be leveraged for the optimization of alignment targets. In this paper, we show how we applied this computational approach to wafer alignment target design. We verify the correlation between predictions and measurements for the key alignment performance metrics and finally show the potential alignment and overlay performance improvements that an optimized alignment target could achieve.

  11. Advanced overlay analysis through design based metrology

    NASA Astrophysics Data System (ADS)

    Ji, Sunkeun; Yoo, Gyun; Jo, Gyoyeon; Kang, Hyunwoo; Park, Minwoo; Kim, Jungchan; Park, Chanha; Yang, Hyunjo; Yim, Donggyu; Maruyama, Kotaro; Park, Byungjun; Yamamoto, Masahiro

    2015-03-01

    As design rule shrink, overlay has been critical factor for semiconductor manufacturing. However, the overlay error which is determined by a conventional measurement with an overlay mark based on IBO and DBO often does not represent the physical placement error in the cell area. The mismatch may arise from the size or pitch difference between the overlay mark and the cell pattern. Pattern distortion caused by etching or CMP also can be a source of the mismatch. In 2014, we have demonstrated that method of overlay measurement in the cell area by using DBM (Design Based Metrology) tool has more accurate overlay value than conventional method by using an overlay mark. We have verified the reproducibility by measuring repeatable patterns in the cell area, and also demonstrated the reliability by comparing with CD-SEM data. We have focused overlay mismatching between overlay mark and cell area until now, further more we have concerned with the cell area having different pattern density and etch loading. There appears a phenomenon which has different overlay values on the cells with diverse patterning environment. In this paper, the overlay error was investigated from cell edge to center. For this experiment, we have verified several critical layers in DRAM by using improved(Better resolution and speed) DBM tool, NGR3520.

  12. Real cell overlay measurement through design based metrology

    NASA Astrophysics Data System (ADS)

    Yoo, Gyun; Kim, Jungchan; Park, Chanha; Lee, Taehyeong; Ji, Sunkeun; Jo, Gyoyeon; Yang, Hyunjo; Yim, Donggyu; Yamamoto, Masahiro; Maruyama, Kotaro; Park, Byungjun

    2014-04-01

    Until recent device nodes, lithography has been struggling to improve its resolution limit. Even though next generation lithography technology is now facing various difficulties, several innovative resolution enhancement technologies, based on 193nm wavelength, were introduced and implemented to keep the trend of device scaling. Scanner makers keep developing state-of-the-art exposure system which guarantees higher productivity and meets a more aggressive overlay specification. "The scaling reduction of the overlay error has been a simple matter of the capability of exposure tools. However, it is clear that the scanner contributions may no longer be the majority component in total overlay performance. The ability to control correctable overlay components is paramount to achieve the desired performance.(2)" In a manufacturing fab, the overlay error, determined by a conventional overlay measurement: by using an overlay mark based on IBO and DBO, often does not represent the physical placement error in the cell area of a memory device. The mismatch may arise from the size or pitch difference between the overlay mark and the cell pattern. Pattern distortion, caused by etching or CMP, also can be a source of the mismatch. Therefore, the requirement of a direct overlay measurement in the cell pattern gradually increases in the manufacturing field, and also in the development level. In order to overcome the mismatch between conventional overlay measurement and the real placement error of layer to layer in the cell area of a memory device, we suggest an alternative overlay measurement method utilizing by design, based metrology tool. A basic concept of this method is shown in figure1. A CD-SEM measurement of the overlay error between layer 1 and 2 could be the ideal method but it takes too long time to extract a lot of data from wafer level. An E-beam based DBM tool provides high speed to cover the whole wafer with high repeatability. It is enabled by using the design as a reference for overlay measurement and a high speed scan system. In this paper, we have demonstrated that direct overlay measurement in the cell area can distinguish the mismatch exactly, instead of using overlay mark. This experiment was carried out for several critical layer in DRAM and Flash memory, using DBM(Design Based Metrology) tool, NGR2170™.

  13. Image-based overlay measurement using subsurface ultrasonic resonance force microscopy

    NASA Astrophysics Data System (ADS)

    Tamer, M. S.; van der Lans, M. J.; Sadeghian, H.

    2018-03-01

    Image Based Overlay (IBO) measurement is one of the most common techniques used in Integrated Circuit (IC) manufacturing to extract the overlay error values. The overlay error is measured using dedicated overlay targets which are optimized to increase the accuracy and the resolution, but these features are much larger than the IC feature size. IBO measurements are realized on the dedicated targets instead of product features, because the current overlay metrology solutions, mainly based on optics, cannot provide sufficient resolution on product features. However, considering the fact that the overlay error tolerance is approaching 2 nm, the overlay error measurement on product features becomes a need for the industry. For sub-nanometer resolution metrology, Scanning Probe Microscopy (SPM) is widely used, though at the cost of very low throughput. The semiconductor industry is interested in non-destructive imaging of buried structures under one or more layers for the application of overlay and wafer alignment, specifically through optically opaque media. Recently an SPM technique has been developed for imaging subsurface features which can be potentially considered as a solution for overlay metrology. In this paper we present the use of Subsurface Ultrasonic Resonance Force Microscopy (SSURFM) used for IBO measurement. We used SSURFM for imaging the most commonly used overlay targets on a silicon substrate and photoresist. As a proof of concept we have imaged surface and subsurface structures simultaneously. The surface and subsurface features of the overlay targets are fabricated with programmed overlay errors of +/-40 nm, +/-20 nm, and 0 nm. The top layer thickness changes between 30 nm and 80 nm. Using SSURFM the surface and subsurface features were successfully imaged and the overlay errors were extracted, via a rudimentary image processing algorithm. The measurement results are in agreement with the nominal values of the programmed overlay errors.

  14. Positron annihilation and X-ray diffraction studies on tin oxide thin films

    NASA Astrophysics Data System (ADS)

    Prabakar, K.; Abhaya, S.; Krishnan, R.; Kalavathi, S.; Dash, S.; Jayapandian, J.; Amarendra, G.

    2009-04-01

    Positron annihilation spectroscopy along with glancing incidence X-ray diffraction have been used to investigate tin oxide thin films grown on Si by pulsed laser deposition. The films were prepared at room temperature and at 670 K under oxygen partial pressure. As-grown samples are amorphous and are found to contain large concentration of open volume sites (vacancy defects). Post-deposition annealing of as-grown samples at 970 K is found to drastically reduce the number of open volume sites and the film becomes crystalline. However, film grown under elevated temperature and under partial pressure of oxygen is found to exhibit a lower S-parameter, indicating lower defect concentration. Based on the analysis of experimental positron annihilation results, the defect-sensitive S-parameter and the overlayer thickness of tin oxide thin films are deduced. S- W correlation plots exhibit distinct positron trapping defect states in three samples.

  15. SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM

    NASA Astrophysics Data System (ADS)

    Hasumi, Kazuhisa; Inoue, Osamu; Okagawa, Yutaka; Shao, Chuanyu; Leray, Philippe; Halder, Sandip; Lorusso, Gian; Jehoul, Christiane

    2017-03-01

    The miniaturization of semiconductors continues, importance of overlay measurement is increasing. We measured overlay with analysis SEM called Miracle Eye which can output ultrahigh acceleration voltage in 1998. Meanwhile, since 2006, we have been working on SEM based overlay measurement and developed overlay measurement function of the same layer using CD-SEM. Then, we evaluated overlay of the same layer pattern after etching. This time, in order to measure overlay after lithography, we evaluated the see-through overlay using high voltage SEM CV5000 released in October 2016. In collaboration between imec and Hitachi High-Technologies, we evaluated repeatability, TIS of SEM-OVL as well as correlation between SEM-OVL and Opt-OVL in the M1@ADI and V0@ADI process. Repeatability and TIS results are reasonable and SEM-OVL has good correlation with Opt-OVL. By overlay measurement using CV 5000, we got the following conclusions. (1)SEM_OVL results of both M1 and V0 at ADI show good correlation to OPT_OVL. (2)High voltage SEM can prove the measurement capability of a small pattern(Less than 1 2um) like device that can be placed in-die area. (3)"In-die SEM based overlay" shows possibility for high order control of scanner

  16. Two Dimensional Array Based Overlay Network for Balancing Load of Peer-to-Peer Live Video Streaming

    NASA Astrophysics Data System (ADS)

    Faruq Ibn Ibrahimy, Abdullah; Rafiqul, Islam Md; Anwar, Farhat; Ibn Ibrahimy, Muhammad

    2013-12-01

    The live video data is streaming usually in a tree-based overlay network or in a mesh-based overlay network. In case of departure of a peer with additional upload bandwidth, the overlay network becomes very vulnerable to churn. In this paper, a two dimensional array-based overlay network is proposed for streaming the live video stream data. As there is always a peer or a live video streaming server to upload the live video stream data, so the overlay network is very stable and very robust to churn. Peers are placed according to their upload and download bandwidth, which enhances the balance of load and performance. The overlay network utilizes the additional upload bandwidth of peers to minimize chunk delivery delay and to maximize balance of load. The procedure, which is used for distributing the additional upload bandwidth of the peers, distributes the additional upload bandwidth to the heterogeneous strength peers in a fair treat distribution approach and to the homogeneous strength peers in a uniform distribution approach. The proposed overlay network has been simulated by Qualnet from Scalable Network Technologies and results are presented in this paper.

  17. Effect of Mesostructured Layer upon Crystalline Properties and Device Performance on Perovskite Solar Cells.

    PubMed

    Listorti, Andrea; Juarez-Perez, Emilio J; Frontera, Carlos; Roiati, Vittoria; Garcia-Andrade, Laura; Colella, Silvia; Rizzo, Aurora; Ortiz, Pablo; Mora-Sero, Ivan

    2015-05-07

    One of the most fascinating characteristics of perovskite solar cells (PSCs) is the retrieved obtainment of outstanding photovoltaic (PV) performances withstanding important device configuration variations. Here we have analyzed CH3NH3PbI3-xClx in planar or in mesostructured (MS) configurations, employing both titania and alumina scaffolds, fully infiltrated with perovskite material or presenting an overstanding layer. The use of the MS scaffold induces to the perovskite different structural properties, in terms of grain size, preferential orientation, and unit cell volume, in comparison to the ones of the material grown with no constraints, as we have found out by X-ray diffraction analyses. We have studied the effect of the PSC configuration on photoinduced absorption and time-resolved photoluminescence, complementary techniques that allow studying charge photogeneration and recombination. We have estimated electron diffusion length in the considered configurations observing a decrease when the material is confined in the MS scaffold with respect to a planar architecture. However, the presence of perovskite overlayer allows an overall recovering of long diffusion lengths explaining the record PV performances obtained with a device configuration bearing both the mesostructure and a perovskite overlayer. Our results suggest that performance in devices with perovskite overlayer is mainly ruled by the overlayer, whereas the mesoporous layer influences the contact properties.

  18. Transition from overlayer growth to alloying growth of Ga on Si(111)-alpha-(sqrt[3]xsqrt[3])-Au.

    PubMed

    Yamanaka, T; Ino, S

    2002-11-04

    Atomic depth distribution and growth modes of Ga on an Si(111)-alpha-(sqrt[3]xsqrt[3])-Au surface at room temperature were studied after each monolayer deposition of Ga via reflection high-energy electron diffraction and characteristic x-ray spectroscopy measurements as functions of glancing angle theta(g) of the incident electron beam. One monolayer of Ga grew on the Au layer, and the sqrt[3]xsqrt[3] periodicity was conserved below the Ga overlayer. Above a critical Ga coverage of about one monolayer, this growth mode drastically changed; i.e., Au atoms dissociated from the sqrt[3]xsqrt[3] structure and Ga grew into islands of Ga-Au alloy.

  19. Application of Ni-Oxide@TiO₂ Core-Shell Structures to Photocatalytic Mixed Dye Degradation, CO Oxidation, and Supercapacitors.

    PubMed

    Lee, Seungwon; Lee, Jisuk; Nam, Kyusuk; Shin, Weon Gyu; Sohn, Youngku

    2016-12-20

    Performing diverse application tests on synthesized metal oxides is critical for identifying suitable application areas based on the material performances. In the present study, Ni-oxide@TiO₂ core-shell materials were synthesized and applied to photocatalytic mixed dye (methyl orange + rhodamine + methylene blue) degradation under ultraviolet (UV) and visible lights, CO oxidation, and supercapacitors. Their physicochemical properties were examined by field-emission scanning electron microscopy, X-ray diffraction analysis, Fourier-transform infrared spectroscopy, and UV-visible absorption spectroscopy. It was shown that their performances were highly dependent on the morphology, thermal treatment procedure, and TiO₂ overlayer coating.

  20. Ablative overlays for Space Shuttle leading edge ascent heat protection

    NASA Technical Reports Server (NTRS)

    Strauss, E. L.

    1975-01-01

    Ablative overlays were evaluated via a plasma-arc simulation of the ascent pulse on the leading edge of the Space Shuttle Orbiter. Overlay concepts included corkboard, polyisocyanurate foam, low-density Teflon, epoxy, and subliming salts. Their densities ranged from 4.9 to 81 lb per cu ft, and the thicknesses varied from 0.107 to 0.330 in. Swept-leading-edge models were fabricated from 30-lb per cu ft silicone-based ablators. The overlays were bonded to maintain the surface temperature of the base ablator below 500 F during ascent. Foams provided minimum-weight overlays, and subliming salts provided minimum-thickness overlays. Teflon left the most uniform surface after ascent heating.

  1. Polymer concrete overlay on the Big Swan Creek Bridge : condition of overlay after two years in service.

    DOT National Transportation Integrated Search

    1986-01-01

    The multiple-layer polymer concrete overlay on the Big Swan Creek Bridge was soundly bonded to the base concrete and providing excellent protection against the infiltration of chloride ions after 2 years in service. Evaluations of this and PC overlay...

  2. Reduction of wafer-edge overlay errors using advanced correction models, optimized for minimal metrology requirements

    NASA Astrophysics Data System (ADS)

    Kim, Min-Suk; Won, Hwa-Yeon; Jeong, Jong-Mun; Böcker, Paul; Vergaij-Huizer, Lydia; Kupers, Michiel; Jovanović, Milenko; Sochal, Inez; Ryan, Kevin; Sun, Kyu-Tae; Lim, Young-Wan; Byun, Jin-Moo; Kim, Gwang-Gon; Suh, Jung-Joon

    2016-03-01

    In order to optimize yield in DRAM semiconductor manufacturing for 2x nodes and beyond, the (processing induced) overlay fingerprint towards the edge of the wafer needs to be reduced. Traditionally, this is achieved by acquiring denser overlay metrology at the edge of the wafer, to feed field-by-field corrections. Although field-by-field corrections can be effective in reducing localized overlay errors, the requirement for dense metrology to determine the corrections can become a limiting factor due to a significant increase of metrology time and cost. In this study, a more cost-effective solution has been found in extending the regular correction model with an edge-specific component. This new overlay correction model can be driven by an optimized, sparser sampling especially at the wafer edge area, and also allows for a reduction of noise propagation. Lithography correction potential has been maximized, with significantly less metrology needs. Evaluations have been performed, demonstrating the benefit of edge models in terms of on-product overlay performance, as well as cell based overlay performance based on metrology-to-cell matching improvements. Performance can be increased compared to POR modeling and sampling, which can contribute to (overlay based) yield improvement. Based on advanced modeling including edge components, metrology requirements have been optimized, enabling integrated metrology which drives down overall metrology fab footprint and lithography cycle time.

  3. Final report : Polymer concrete overlay on Beulah Road Bridge : condition of overlay after one year in service.

    DOT National Transportation Integrated Search

    1983-01-01

    An evaluation of the thin polymer concrete overlay placed on the Beulah Road bridge indicates that the overlay is securely bonded to the base concrete and is providing low permeability and high skid resistance after 1 year of service life. The lane c...

  4. In-cell overlay metrology by using optical metrology tool

    NASA Astrophysics Data System (ADS)

    Lee, Honggoo; Han, Sangjun; Hong, Minhyung; Kim, Seungyoung; Lee, Jieun; Lee, DongYoung; Oh, Eungryong; Choi, Ahlin; Park, Hyowon; Liang, Waley; Choi, DongSub; Kim, Nakyoon; Lee, Jeongpyo; Pandev, Stilian; Jeon, Sanghuck; Robinson, John C.

    2018-03-01

    Overlay is one of the most critical process control steps of semiconductor manufacturing technology. A typical advanced scheme includes an overlay feedback loop based on after litho optical imaging overlay metrology on scribeline targets. The after litho control loop typically involves high frequency sampling: every lot or nearly every lot. An after etch overlay metrology step is often included, at a lower sampling frequency, in order to characterize and compensate for bias. The after etch metrology step often involves CD-SEM metrology, in this case in-cell and ondevice. This work explores an alternative approach using spectroscopic ellipsometry (SE) metrology and a machine learning analysis technique. Advanced 1x nm DRAM wafers were prepared, including both nominal (POR) wafers with mean overlay offsets, as well as DOE wafers with intentional across wafer overlay modulation. After litho metrology was measured using optical imaging metrology, as well as after etch metrology using both SE and CD-SEM for comparison. We investigate 2 types of machine learning techniques with SE data: model-less and model-based, showing excellent performance for after etch in-cell on-device overlay metrology.

  5. Application of Ni-Oxide@TiO2 Core-Shell Structures to Photocatalytic Mixed Dye Degradation, CO Oxidation, and Supercapacitors

    PubMed Central

    Lee, Seungwon; Lee, Jisuk; Nam, Kyusuk; Shin, Weon Gyu; Sohn, Youngku

    2016-01-01

    Performing diverse application tests on synthesized metal oxides is critical for identifying suitable application areas based on the material performances. In the present study, Ni-oxide@TiO2 core-shell materials were synthesized and applied to photocatalytic mixed dye (methyl orange + rhodamine + methylene blue) degradation under ultraviolet (UV) and visible lights, CO oxidation, and supercapacitors. Their physicochemical properties were examined by field-emission scanning electron microscopy, X-ray diffraction analysis, Fourier-transform infrared spectroscopy, and UV-visible absorption spectroscopy. It was shown that their performances were highly dependent on the morphology, thermal treatment procedure, and TiO2 overlayer coating. PMID:28774145

  6. A comparison of advanced overlay technologies

    NASA Astrophysics Data System (ADS)

    Dasari, Prasad; Smith, Nigel; Goelzer, Gary; Liu, Zhuan; Li, Jie; Tan, Asher; Koh, Chin Hwee

    2010-03-01

    The extension of optical lithography to 22nm and beyond by Double Patterning Technology is often challenged by CDU and overlay control. With reduced overlay measurement error budgets in the sub-nm range, relying on traditional Total Measurement Uncertainty (TMU) estimates alone is no longer sufficient. In this paper we will report scatterometry overlay measurements data from a set of twelve test wafers, using four different target designs. The TMU of these measurements is under 0.4nm, within the process control requirements for the 22nm node. Comparing the measurement differences between DBO targets (using empirical and model based analysis) and with image-based overlay data indicates the presence of systematic and random measurement errors that exceeds the TMU estimate.

  7. Performance of ASML YieldStar μDBO overlay targets for advanced lithography nodes C028 and C014 overlay process control

    NASA Astrophysics Data System (ADS)

    Blancquaert, Yoann; Dezauzier, Christophe; Depre, Jerome; Miqyass, Mohamed; Beltman, Jan

    2013-04-01

    Continued tightening of overlay control budget in semiconductor lithography drives the need for improved metrology capabilities. Aggressive improvements are needed for overlay metrology speed, accuracy and precision. This paper is dealing with the on product metrology results of a scatterometry based platform showing excellent production results on resolution, precision, and tool matching for overlay. We will demonstrate point to point matching between tool generations as well as between target sizes and types. Nowadays, for the advanced process nodes a lot of information is needed (Higher order process correction, Reticle fingerprint, wafer edge effects) to quantify process overlay. For that purpose various overlay sampling schemes are evaluated: ultra- dense, dense and production type. We will show DBO results from multiple target type and shape for on product overlay control for current and future node down to at least 14 nm node. As overlay requirements drive metrology needs, we will evaluate if the new metrology platform meets the overlay requirements.

  8. Interband Transitions

    NASA Astrophysics Data System (ADS)

    Varma, Shikha

    We have studied thin (1-7 monolayer) overlayers of Hg on Ag(100) and Cu(100) using angle-resolved photoemission and low energy electron diffraction. We have investigated the electronic states of well ordered, disordered and the liquid overlayers of mercury. We show that the electronic structure of the well ordered overlayers is very different than that of the disordered and the liquid overlayers. The well ordered overlayers of Hg on Ag(100) exhibit a new electronic state which is absent for the disordered overlayers of mercury as well as for gaseous mercury. We will argue that this new Hg state is a result of the interaction among the Hg-Hg atoms, when adsorbed on Ag(100). The strain among adlayer atoms also plays a crucial role in the development of the new electronic state. We have used the synchrotron radiation to study the partial cross-section and the branching ratio of the 5d electronic state of Hg. We have measured the partial cross-section and branching ratio of the well-ordered, disordered and liquid overlayers of mercury on Ag(100) and Cu(100). We have observed resonances in the photoemission intensities of the mercury 5d orbitals for thin films of mercury for incident photon energies near the 5p _{3/2}, 4f_{7/2 } and 4f_{5/2} thresholds. The results indicate that interband transitions from the 5p and 4f levels to the 5d orbitals can occur for a thin overlayer of mercury, as a result of final state 5f contributions, though such interband transitions are forbidden for the free isolated Hg atom. These resonances are attributed to the formation of a solid state band structure incorporating new itinerant mercury electronic state. These resonances are absent when the mercury film is disordered or melted. We have measured the branching ratio of the 5d orbital for thin mercury overlayers in the photon energy range between 26 to 105 eV. The branching ratios deviate from the nonrelativistic statistical value of 1.5, reaching values of 8.0. These results indicate the importance of long range crystallographic structure and the effect of many -electron interactions in a thin film of mercury. We have also studied the intra molecular excitations in Br_2 and I_2 molecules using electron energy loss studies. These excitations give the information about the electronic structure of the molecule. From these studies we have identified the separation between the occupied and unoccupied orbitals of adsorbed halogen molecules on Fe(100).

  9. Accuracy optimization with wavelength tunability in overlay imaging technology

    NASA Astrophysics Data System (ADS)

    Lee, Honggoo; Kang, Yoonshik; Han, Sangjoon; Shim, Kyuchan; Hong, Minhyung; Kim, Seungyoung; Lee, Jieun; Lee, Dongyoung; Oh, Eungryong; Choi, Ahlin; Kim, Youngsik; Marciano, Tal; Klein, Dana; Hajaj, Eitan M.; Aharon, Sharon; Ben-Dov, Guy; Lilach, Saltoun; Serero, Dan; Golotsvan, Anna

    2018-03-01

    As semiconductor manufacturing technology progresses and the dimensions of integrated circuit elements shrink, overlay budget is accordingly being reduced. Overlay budget closely approaches the scale of measurement inaccuracies due to both optical imperfections of the measurement system and the interaction of light with geometrical asymmetries of the measured targets. Measurement inaccuracies can no longer be ignored due to their significant effect on the resulting device yield. In this paper we investigate a new approach for imaging based overlay (IBO) measurements by optimizing accuracy rather than contrast precision, including its effect over the total target performance, using wavelength tunable overlay imaging metrology. We present new accuracy metrics based on theoretical development and present their quality in identifying the measurement accuracy when compared to CD-SEM overlay measurements. The paper presents the theoretical considerations and simulation work, as well as measurement data, for which tunability combined with the new accuracy metrics is shown to improve accuracy performance.

  10. RHEED and EELS study of Pd/Al bimetallic thin film growth on different α-Al 2O 3 substrates

    NASA Astrophysics Data System (ADS)

    Moroz, V.; Rajs, K.; Mašek, K.

    2002-06-01

    Pd/Al bimetallic thin films were grown by molecular beam epitaxy on single-crystalline α-Al 2O 3(0 0 0 1) and (1 1 2¯ 0) surfaces. Substrate and deposit crystallographic structures and evolution of deposit lattice parameter during the growth were studied by reflection high-energy electron diffraction. The electron energy loss spectroscopy was used as an auxiliary method for chemical analysis. The bimetallic films were prepared by successive deposition of both Pd and Al metals. The structure of Pd and Al deposits in early stages of the growth and its dependence on the preparation conditions were studied. Two phases of Pd clusters covered by Al overlayer have been found. The formation of Al overlayer strongly influenced the lattice parameter of Pd clusters.

  11. VMCast: A VM-Assisted Stability Enhancing Solution for Tree-Based Overlay Multicast

    PubMed Central

    Gu, Weidong; Zhang, Xinchang; Gong, Bin; Zhang, Wei; Wang, Lu

    2015-01-01

    Tree-based overlay multicast is an effective group communication method for media streaming applications. However, a group member’s departure causes all of its descendants to be disconnected from the multicast tree for some time, which results in poor performance. The above problem is difficult to be addressed because overlay multicast tree is intrinsically instable. In this paper, we proposed a novel stability enhancing solution, VMCast, for tree-based overlay multicast. This solution uses two types of on-demand cloud virtual machines (VMs), i.e., multicast VMs (MVMs) and compensation VMs (CVMs). MVMs are used to disseminate the multicast data, whereas CVMs are used to offer streaming compensation. The used VMs in the same cloud datacenter constitute a VM cluster. Each VM cluster is responsible for a service domain (VMSD), and each group member belongs to a specific VMSD. The data source delivers the multicast data to MVMs through a reliable path, and MVMs further disseminate the data to group members along domain overlay multicast trees. The above approach structurally improves the stability of the overlay multicast tree. We further utilized CVM-based streaming compensation to enhance the stability of the data distribution in the VMSDs. VMCast can be used as an extension to existing tree-based overlay multicast solutions, to provide better services for media streaming applications. We applied VMCast to two application instances (i.e., HMTP and HCcast). The results show that it can obviously enhance the stability of the data distribution. PMID:26562152

  12. VMCast: A VM-Assisted Stability Enhancing Solution for Tree-Based Overlay Multicast.

    PubMed

    Gu, Weidong; Zhang, Xinchang; Gong, Bin; Zhang, Wei; Wang, Lu

    2015-01-01

    Tree-based overlay multicast is an effective group communication method for media streaming applications. However, a group member's departure causes all of its descendants to be disconnected from the multicast tree for some time, which results in poor performance. The above problem is difficult to be addressed because overlay multicast tree is intrinsically instable. In this paper, we proposed a novel stability enhancing solution, VMCast, for tree-based overlay multicast. This solution uses two types of on-demand cloud virtual machines (VMs), i.e., multicast VMs (MVMs) and compensation VMs (CVMs). MVMs are used to disseminate the multicast data, whereas CVMs are used to offer streaming compensation. The used VMs in the same cloud datacenter constitute a VM cluster. Each VM cluster is responsible for a service domain (VMSD), and each group member belongs to a specific VMSD. The data source delivers the multicast data to MVMs through a reliable path, and MVMs further disseminate the data to group members along domain overlay multicast trees. The above approach structurally improves the stability of the overlay multicast tree. We further utilized CVM-based streaming compensation to enhance the stability of the data distribution in the VMSDs. VMCast can be used as an extension to existing tree-based overlay multicast solutions, to provide better services for media streaming applications. We applied VMCast to two application instances (i.e., HMTP and HCcast). The results show that it can obviously enhance the stability of the data distribution.

  13. Magnetism of CrO overlayers on Fe(001)bcc surface: first principles calculations

    NASA Astrophysics Data System (ADS)

    Félix-Medina, Raúl Enrique; Leyva-Lucero, Manuel Andrés; Meza-Aguilar, Salvador; Demangeat, Claude

    2018-04-01

    Riva et al. [Surf. Sci. 621, 55 (2014)] as well as Calloni et al. [J. Phys.: Condens. Matter 26, 445001 (2014)] have studied the oxydation of Cr films deposited on Fe(001)bcc through low-energy electron diffraction, Auger electron spectroscopy and scanning tunneling microscopy. In the present work we perform a density functional approach within Quantum Expresso code in order to study structural and magnetic properties of CrO overlayers on Fe(001)bcc. The calculations are performed using DFT+U. The investigated systems include O/Cr/Fe(001)bcc, Cr/O/Fe(001)bcc, Cr0.25O0.75/Fe(001)bcc, as well as the O coverage Ox/Cr/Fe(001)bcc (x = 0.25; 0.50). We have found that the ordered CrO overlayer presents an antiferromagnetic coupling between Cr and Fe atoms. The O atoms are located closer to the Fe atoms of the surface than the Cr atoms. The ground state of the systems O/Cr/Fe(001)bcc and Cr/O/Fe(001)bcc corresponds to the O/Cr/Fe(001)bcc system with a magnetic coupling c(2 × 2). The effect of the O monolayer on Cr/Fe(001)bcc changes the ground state from p(1 × 1) ↓ to c(2 × 2) and produces an enhancement of the magnetic moments. The Ox overlayer on Cr/Fe(001)bcc produces an enhancement of the Cr magnetic moments.

  14. Driving imaging and overlay performance to the limits with advanced lithography optimization

    NASA Astrophysics Data System (ADS)

    Mulkens, Jan; Finders, Jo; van der Laan, Hans; Hinnen, Paul; Kubis, Michael; Beems, Marcel

    2012-03-01

    Immersion lithography is being extended to 22-nm and even below. Next to generic scanner system improvements, application specific solutions are needed to follow the requirements for CD control and overlay. Starting from the performance budgets, this paper discusses how to improve (in volume manufacturing environment) CDU towards 1-nm and overlay towards 3-nm. The improvements are based on deploying the actuator capabilities of the immersion scanner. The latest generation immersion scanners have extended the correction capabilities for overlay and imaging, offering freeform adjustments of lens, illuminator and wafer grid. In order to determine the needed adjustments the recipe generation per user application is based on a combination wafer metrology data and computational lithography methods. For overlay, focus and CD metrology we use an angle resolved optical scatterometer.

  15. Device overlay method for high volume manufacturing

    NASA Astrophysics Data System (ADS)

    Lee, Honggoo; Han, Sangjun; Kim, Youngsik; Kim, Myoungsoo; Heo, Hoyoung; Jeon, Sanghuck; Choi, DongSub; Nabeth, Jeremy; Brinster, Irina; Pierson, Bill; Robinson, John C.

    2016-03-01

    Advancing technology nodes with smaller process margins require improved photolithography overlay control. Overlay control at develop inspection (DI) based on optical metrology targets is well established in semiconductor manufacturing. Advances in target design and metrology technology have enabled significant improvements in overlay precision and accuracy. One approach to represent in-die on-device as-etched overlay is to measure at final inspection (FI) with a scanning electron microscope (SEM). Disadvantages to this approach include inability to rework, limited layer coverage due to lack of transparency, and higher cost of ownership (CoO). A hybrid approach is investigated in this report whereby infrequent DI/FI bias is characterized and the results are used to compensate the frequent DI overlay results. The bias characterization is done on an infrequent basis, either based on time or triggered from change points. On a per-device and per-layer basis, the optical target overlay at DI is compared with SEM on-device overlay at FI. The bias characterization results are validated and tracked for use in compensating the DI APC controller. Results of the DI/FI bias characterization and sources of variation are presented, as well as the impact on the DI correctables feeding the APC system. Implementation details in a high volume manufacturing (HVM) wafer fab will be reviewed. Finally future directions of the investigation will be discussed.

  16. Design of overlays for flexible pavements based on AASHTO road test data.

    DOT National Transportation Integrated Search

    1978-01-01

    The need for a suitable method of designing the thickness of overlays and predicting the performance of the overlaid pavement has recently been recognized. The AASHTO Road Tests included studies on 99 overlays, but they failed to produce conclusive r...

  17. Patterned wafer geometry grouping for improved overlay control

    NASA Astrophysics Data System (ADS)

    Lee, Honggoo; Han, Sangjun; Woo, Jaeson; Park, Junbeom; Song, Changrock; Anis, Fatima; Vukkadala, Pradeep; Jeon, Sanghuck; Choi, DongSub; Huang, Kevin; Heo, Hoyoung; Smith, Mark D.; Robinson, John C.

    2017-03-01

    Process-induced overlay errors from outside the litho cell have become a significant contributor to the overlay error budget including non-uniform wafer stress. Previous studies have shown the correlation between process-induced stress and overlay and the opportunity for improvement in process control, including the use of patterned wafer geometry (PWG) metrology to reduce stress-induced overlay signatures. Key challenges of volume semiconductor manufacturing are how to improve not only the magnitude of these signatures, but also the wafer to wafer variability. This work involves a novel technique of using PWG metrology to provide improved litho-control by wafer-level grouping based on incoming process induced overlay, relevant for both 3D NAND and DRAM. Examples shown in this study are from 19 nm DRAM manufacturing.

  18. Light emitting ceramic device

    DOEpatents

    Valentine, Paul; Edwards, Doreen D.; Walker, Jr., William John; Slack, Lyle H.; Brown, Wayne Douglas; Osborne, Cathy; Norton, Michael; Begley, Richard

    2010-05-18

    A light-emitting ceramic based panel, hereafter termed "electroceramescent" panel, is herein claimed. The electroceramescent panel is formed on a substrate providing mechanical support as well as serving as the base electrode for the device. One or more semiconductive ceramic layers directly overlay the substrate, and electrical conductivity and ionic diffusion are controlled. Light emitting regions overlay the semiconductive ceramic layers, and said regions consist sequentially of a layer of a ceramic insulation layer and an electroluminescent layer, comprised of doped phosphors or the equivalent. One or more conductive top electrode layers having optically transmissive areas overlay the light emitting regions, and a multi-layered top barrier cover comprising one or more optically transmissive non-combustible insulation layers overlay said top electrode regions.

  19. The Newport Button: The Large Scale Replication Of Combined Three-And Two-Dimensional Holographic Images

    NASA Astrophysics Data System (ADS)

    Cowan, James J.

    1984-05-01

    A unique type of holographic imagery and its large scale replication are described. The "Newport Button", which was designed as an advertising premium item for the Newport Corporation, incorporates a complex overlay of holographic diffraction gratings surrounding a three-dimensional holographic image of a real object. The combined pattern is recorded onto a photosensitive medium from which a metal master is made. The master is subsequently used to repeatedly emboss the pattern into a thin plastic sheet. Individual patterns are then die cut from the metallized plastic and mounted onto buttons. A discussion is given of the diffraction efficiencies of holograms made in this particular fashion and of the special requirements of the replication process.

  20. The Effect of pH on Slurry Erosion-Corrosion of Tungsten Carbide Overlays Alloyed with Ru

    NASA Astrophysics Data System (ADS)

    Nelwalani, Ndivhuwo B.; van der Merwe, Josias W.

    2018-02-01

    The aim of the study was to determine the effect of Ru additions to WC-Fe overlays when exposed to low pH slurry erosion conditions. These overlays were applied through Plasma Transferred Arc, and the original bulk Ru powder concentrations varied from 0.5 to 5 wt.%. A slurry jet impingement erosion-corrosion test rig was used to evaluate wear, and electrochemical measurements were performed to characterize the corrosion properties. The slurry mixtures contained silica sand and synthetic mine water. The pH was varied between 3 and 6.5 for the slurry erosion tests and lowered further for the corrosion characterization. Samples were examined optically and with a scanning electron microscope using energy-dispersive x-ray spectroscopy. X-ray diffraction analysis was used to determine the phases present. For the slurry erosion-corrosion results at the pH of 6.5, addition of Ru did not show a decrease in erosion-corrosion rates. However, when the pH was decreased to 3, by the addition of HCl, Ru improved the resistance. From the electrochemistry, it was also clear that Ru additions improved the corrosion resistance, but more than 1 wt.% Ru was required. At very low pH levels, the presence of Ru was not able to prevent corrosion.

  1. Development of improved pavement rehabilitation procedures based on FWD backcalculation.

    DOT National Transportation Integrated Search

    2015-01-01

    Hot Mix Asphalt (HMA) overlays are among the most effective maintenance and rehabilitation : alternatives in improving the structural as well as functional performance of flexible pavements. HMA : overlay design procedures can be based on: (1) engine...

  2. In-situ formation of multiphase air plasma sprayed barrier coatings for turbine components

    DOEpatents

    Subramanian, Ramesh

    2001-01-01

    A turbine component (10), such as a turbine blade, is provided which is made of a metal alloy (22) and a base, planar-grained thermal barrier layer (28) applied by air plasma spraying on the alloy surface, where a heat resistant ceramic oxide overlay material (32') covers the bottom thermal barrier coating (28), and the overlay material is the reaction product of the precursor ceramic oxide overlay material (32) and the base thermal barrier coating material (28).

  3. A map overlay error model based on boundary geometry

    USGS Publications Warehouse

    Gaeuman, D.; Symanzik, J.; Schmidt, J.C.

    2005-01-01

    An error model for quantifying the magnitudes and variability of errors generated in the areas of polygons during spatial overlay of vector geographic information system layers is presented. Numerical simulation of polygon boundary displacements was used to propagate coordinate errors to spatial overlays. The model departs from most previous error models in that it incorporates spatial dependence of coordinate errors at the scale of the boundary segment. It can be readily adapted to match the scale of error-boundary interactions responsible for error generation on a given overlay. The area of error generated by overlay depends on the sinuosity of polygon boundaries, as well as the magnitude of the coordinate errors on the input layers. Asymmetry in boundary shape has relatively little effect on error generation. Overlay errors are affected by real differences in boundary positions on the input layers, as well as errors in the boundary positions. Real differences between input layers tend to compensate for much of the error generated by coordinate errors. Thus, the area of change measured on an overlay layer produced by the XOR overlay operation will be more accurate if the area of real change depicted on the overlay is large. The model presented here considers these interactions, making it especially useful for estimating errors studies of landscape change over time. ?? 2005 The Ohio State University.

  4. Solving next generation (1x node) metrology challenges using advanced CDSEM capabilities: tilt, high energy and backscatter imaging

    NASA Astrophysics Data System (ADS)

    Zhang, Xiaoxiao; Snow, Patrick W.; Vaid, Alok; Solecky, Eric; Zhou, Hua; Ge, Zhenhua; Yasharzade, Shay; Shoval, Ori; Adan, Ofer; Schwarzband, Ishai; Bar-Zvi, Maayan

    2015-03-01

    Traditional metrology solutions are facing a range of challenges at the 1X node such as three dimensional (3D) measurement capabilities, shrinking overlay and critical dimension (CD) error budgets driven by multi-patterning and via in trench CD measurements. Hybrid metrology offers promising new capabilities to address some of these challenges but it will take some time before fully realized. This paper explores new capabilities currently offered on the in-line Critical Dimension Scanning Electron Microscope (CD-SEM) to address these challenges and enable the CD-SEM to move beyond measuring bottom CD using top down imaging. Device performance is strongly correlated with Fin geometry causing an urgent need for 3D measurements. New beam tilting capabilities enhance the ability to make 3D measurements in the front-end-of-line (FEOL) of the metal gate FinFET process in manufacturing. We explore these new capabilities for measuring Fin height and build upon the work communicated last year at SPIE1. Furthermore, we extend the application of the tilt beam to the back-end-of-line (BEOL) trench depth measurement and demonstrate its capability in production targeting replacement of the existing Atomic Force Microscope (AFM) measurements by including the height measurement in the existing CDSEM recipe to reduce fab cycle time. In the BEOL, another increasingly challenging measurement for the traditional CD-SEM is the bottom CD of the self-aligned via (SAV) in a trench first via last (TFVL) process. Due to the extremely high aspect ratio of the structure secondary electron (SE) collection from the via bottom is significantly reduced requiring the use of backscatter electrons (BSE) to increase the relevant image quality. Even with this solution, the resulting images are difficult to measure with advanced technology nodes. We explore new methods to increase measurement robustness and combine this with novel segmentation-based measurement algorithm generated specifically for BSE images. The results will be contrasted with data from previously used methods to quantify the improvement. We also compare the results to electrical test data to evaluate and quantify the measurement performance improvements. Lastly, according to International Technology Roadmap for Semiconductors (ITRS) from 2013, the overlay 3 sigma requirement will be 3.3 nm in 2015 and 2.9 nm in 2016. Advanced lithography requires overlay measurement in die on features resembling the device geometry. However, current optical overlay measurement is performed in the scribe line on large targets due to optical diffraction limit. In some cases, this limits the usefulness of the measurement since it does not represent the true behavior of the device. We explore using high voltage imaging to help address this urgent need. Novel CD-SEM based overlay targets that optimize the restrictions of process geometry and SEM technique were designed and spread out across the die. Measurements are done on these new targets both after photolithography and etch. Correlation is drawn between the two measurements. These results will also be compared to conventional optical overlay measurement approaches and we will discuss the possibility of using this capability in high volume manufacturing.

  5. Flexible pavement overlay design procedures. Volume 1: Evaluation and modification of the design methods

    NASA Astrophysics Data System (ADS)

    Majidzadeh, K.; Ilves, G. J.

    1981-08-01

    A ready reference to design procedures for asphaltic concrete overlay of flexible pavements based on elastic layer theory is provided. The design procedures and the analytical techniques presented were formulated to predict the structural fatigue response of asphaltic concrete overlays for various design conditions, including geometrical and material properties, loading conditions and environmental variables.

  6. Image-based overlay and alignment metrology through optically opaque media with sub-surface probe microscopy

    NASA Astrophysics Data System (ADS)

    van Es, Maarten H.; Mohtashami, Abbas; Piras, Daniele; Sadeghian, Hamed

    2018-03-01

    Nondestructive subsurface nanoimaging through optically opaque media is considered to be extremely challenging and is essential for several semiconductor metrology applications including overlay and alignment and buried void and defect characterization. The current key challenge in overlay and alignment is the measurement of targets that are covered by optically opaque layers. Moreover, with the device dimensions moving to the smaller nodes and the issue of the so-called loading effect causing offsets between between targets and product features, it is increasingly desirable to perform alignment and overlay on product features or so-called on-cell overlay, which requires higher lateral resolution than optical methods can provide. Our recently developed technique known as SubSurface Ultrasonic Resonance Force Microscopy (SSURFM) has shown the capability for high-resolution imaging of structures below a surface based on (visco-)elasticity of the constituent materials and as such is a promising technique to perform overlay and alignment with high resolution in upcoming production nodes. In this paper, we describe the developed SSURFM technique and the experimental results on imaging buried features through various layers and the ability to detect objects with resolution below 10 nm. In summary, the experimental results show that the SSURFM is a potential solution for on-cell overlay and alignment as well as detecting buried defects or voids and generally metrology through optically opaque layers.

  7. Light emitting ceramic device and method for fabricating the same

    DOEpatents

    Valentine, Paul; Edwards, Doreen D.; Walker Jr., William John; Slack, Lyle H.; Brown, Wayne Douglas; Osborne, Cathy; Norton, Michael; Begley, Richard

    2004-11-30

    A light-emitting ceramic based panel, hereafter termed "electroceramescent" panel, and alternative methods of fabrication for the same are claimed. The electroceramescent panel is formed on a substrate providing mechanical support as well as serving as the base electrode for the device. One or more semiconductive ceramic layers directly overlay the substrate, and electrical conductivity and ionic diffusion are controlled. Light emitting regions overlay the semiconductive ceramic layers, and said regions consist sequentially of a layer of a ceramic insulation layer and an electroluminescent layer, comprised of doped phosphors or the equivalent. One or more conductive top electrode layers having optically transmissive areas overlay the light emitting regions, and a multi-layered top barrier cover comprising one or more optically transmissive non-combustible insulation layers overlay said top electrode regions.

  8. MoOx modified ZnGaO based transparent conducting oxides

    NASA Astrophysics Data System (ADS)

    Dutta, Titas; Gupta, P.; Bhosle, V.; Narayan, J.

    2009-03-01

    We report here the growth of high work function bilayered structures of thin MoOx (2.0

  9. CHARACTERIZATION OF DEFECTS IN ALLOY 152, 52 AND 52M WELDS

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Bruemmer, Stephen M.; Toloczko, Mychailo B.; Olszta, Matthew J.

    2009-08-27

    Defect distributions have been documented by optical metallography, scanning electron microscopy and electron backscatter diffraction in alloy 152 and 52 mockups welds, alloy 52 and 52M overlay mockups and an alloy 52M inlay. Primary defects were small cracks at grain boundaries except for more extensive cracking in the dilution zone of an alloy 52 overlay on 304SS. Detailed characterizations of the dilution zone cracks were performed by analytical transmission electron microscopy identifying grain boundary titanium-nitride precipitation associated with the intergranular separations. I. INTRODUCTION Weldments continue to be a primary location of stress-corrosion cracking (SCC) in light-water reactor systems. While problemsmore » related to heat-affected-zone (HAZ) sensitization and intergranular (IG) SCC of austenitic stainless alloys in boiling-water reactors (BWRs) have been significantly reduced, SCC has now been observed in HAZs of non-sensitized materials and in dissimilar metal welds where Ni-base alloy weld metals are used. IGSCC in weld metals has been observed in both BWRs and pressurized water reactors (PWRs) with recent examples for PWR pressure vessel penetrations producing the most concern. This has led to the replacement of alloy 600/182/82 welds with higher Cr, more corrosion-resistant replacement materials (alloy 690/152/52/52M). Complicating this issue has been a known susceptibility to cracking during welding [1-7] of these weld metals. There is a critical need for an improved understanding of the weld metal metallurgy and defect formation in Ni-base alloy welds to effectively assess long-term performance. A series of macroscopic to microscopic examinations were performed on available mockup welds made with alloy 52 or alloy 152 plus selected overlay and inlay mockups. The intent was to expand our understanding of weld metal structures in simulated LWR service components with a focus on as-welded defects. Microstructural features, defect distributions, defect characteristics and weld residual strains were examined by optical metallography, scanning electron microscopy, electron backscatter diffraction and transmission electron microscopy. Industry-supplied mock-up welds were characterized including alloy 52 and 152 weldments, alloy 52M overlay and inlay welds, and an alloy 52 overlay. II. WELDMENTS II.A. Alloy 52 and 152 Weld Mockups The alloy 52 and 152 weld mockups were fabricated by MHI for the Kewaunee reactor and were obtained from the EPRI NDE Center. The mockups were U-groove welds joining two plates of 304SS as shown in Figure 1. Alloy 152 butter (heat 307380) was placed on the U-groove surface for both mockups by shielded metal arc welding (SMAW). For the alloy 152 weld mockup, the alloy 152 fill (heat 307380) was also applied using SMAW while for the alloy 52 weld mockup, the alloy 52 fill (heat NX2686JK) was applied using gas tungsten arc welding (GTAW). Welding parameters for the fill materials were substantially different with the alloy 152 SMAW having a deposition speed of 4-25 cm/min with a current of 95-145 A and the alloy 52 GTAW having a deposition speed of 4-10 cm/min with a current of 150-300 A. One prominent feature in these mockup welds is the presence of a crack starting at the 304SS butt joint at the bottom of the U-groove and extending up into the weld. It appears that the 304SS plate on either side of the butt joint acted as an anchor for the weld resulting in a stress rise across the slit that drove crack formation and extension up into the fill weld. As will be shown in the next section, the extent of the cracking around this stress riser was much greater in the MHI 52 weld mockup.« less

  10. Hot cracking susceptibility of Alloy 52M weld overlays onto CF8 stainless steel

    NASA Astrophysics Data System (ADS)

    Chu, H. A.; Young, M. C.; Chu, H. C.; Tsay, L. W.; Chen, C.

    2013-02-01

    In this study, weld overlays of Alloy 52M (a nickel-based filler metal) onto CF8 stainless steel (SS) were performed using the gas tungsten arc welding process. Hot cracking in the weld overlays was observed particularly near the interfacial region of the Alloy 52M/CF8 weld overlay. In general, the hot cracks were most likely to occur at the sites with high dilution rates, e.g., at the weld start/end locations of a single pass or in the first and second passes in multi-pass overlays. The region near the weld interface between Alloy 52M and the CF8 SS had a higher hot cracking tendency than the other regions. It was found that the dilution rate and the formation of eutectic-type constituents (i.e., γ/NbC) both played significant roles in the determination of the hot cracking susceptibility of these weld overlays. Nevertheless, hot cracks were entirely eliminated by proper deposition of a SS buffer layer prior to overlaying with Alloy 52M.

  11. The application of inelastic neutron scattering to explore the significance of a magnetic transition in an iron based Fischer-Tropsch catalyst that is active for the hydrogenation of CO

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Warringham, Robbie; McFarlane, Andrew R.; Lennon, David, E-mail: David.Lennon@Glasgow.ac.uk

    2015-11-07

    An iron based Fischer-Tropsch synthesis catalyst is evaluated using CO hydrogenation at ambient pressure as a test reaction and is characterised by a combination of inelastic neutron scattering (INS), powder X-ray diffraction, temperature-programmed oxidation, Raman scattering, and transmission electron microscopy. The INS spectrum of the as-prepared bulk iron oxide pre-catalyst (hematite, α-Fe{sub 2}O{sub 3}) is distinguished by a relatively intense band at 810 cm{sup −1}, which has previously been tentatively assigned as a magnon (spinon) feature. An analysis of the neutron scattering intensity of this band as a function of momentum transfer unambiguously confirms this assignment. Post-reaction, the spinon featuremore » disappears and the INS spectrum is characterised by the presence of a hydrocarbonaceous overlayer. A role for the application of INS in magnetic characterisation of iron based FTS catalysts is briefly considered.« less

  12. Light scattering management of dye-sensitized solar cells based on double-layered photoanodes aided by uniform TiO{sub 2} aggregates

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Bakhshayesh, A.M., E-mail: bakhshayesh@alum.sharif.edu

    2016-01-15

    Highlights: • A new architecture of double-layered TiO{sub 2} electrodes is presented. • The electrode contains two alternate layers of TiO{sub 2} nanoparticles and aggregates. • The aggregates layers are deposited onto the nanocrystalline layer. • The new design showed improved efficiency compared to conventional cells. - Abstract: This study presents a new double-layered TiO{sub 2} film containing a nanocrystalline under-layer and a uniform, sponge-like light scattering over-layer for dye-sensitized solar cells (DSCs) application. The over-layer is composed of 2-μm-diameter uniform aggregates, containing small nanoparticles with the average grain size of 20 nm. X-ray diffraction reveals that the light scatteringmore » layer has a mixture of anatase and rutile phases, whereas the nanocrystalline layer has a pure anatase phase. Ultraviolet–visible (UV–vis) spectra show that the light scattering layer has lower band gap energy than the nanocrystalline under-layer, extending the absorption of TiO{sub 2} into visible region. Diffuse reflectance spectroscopy demonstrates that the double-layered electrode enjoyed better light scattering ability. The double-layered DSC shows the highest power conversion efficiency of 7.69% and incident photon-to-current efficiency of 88% as a result of higher light harvesting and less recombination which is demonstrated by electrochemical impedance spectroscopy.« less

  13. Yield impact for wafer shape misregistration-based binning for overlay APC diagnostic enhancement

    NASA Astrophysics Data System (ADS)

    Jayez, David; Jock, Kevin; Zhou, Yue; Govindarajulu, Venugopal; Zhang, Zhen; Anis, Fatima; Tijiwa-Birk, Felipe; Agarwal, Shivam

    2018-03-01

    The importance of traditionally acceptable sources of variation has started to become more critical as semiconductor technologies continue to push into smaller technology nodes. New metrology techniques are needed to pursue the process uniformity requirements needed for controllable lithography. Process control for lithography has the advantage of being able to adjust for cross-wafer variability, but this requires that all processes are close in matching between process tools/chambers for each process. When this is not the case, the cumulative line variability creates identifiable groups of wafers1 . This cumulative shape based effect is described as impacting overlay measurements and alignment by creating misregistration of the overlay marks. It is necessary to understand what requirements might go into developing a high volume manufacturing approach which leverages this grouping methodology, the key inputs and outputs, and what can be extracted from such an approach. It will be shown that this line variability can be quantified into a loss of electrical yield primarily at the edge of the wafer and proposes a methodology for root cause identification and improvement. This paper will cover the concept of wafer shape based grouping as a diagnostic tool for overlay control and containment, the challenges in implementing this in a manufacturing setting, and the limitations of this approach. This will be accomplished by showing that there are identifiable wafer shape based signatures. These shape based wafer signatures will be shown to be correlated to overlay misregistration, primarily at the edge. It will also be shown that by adjusting for this wafer shape signal, improvements can be made to both overlay as well as electrical yield. These improvements show an increase in edge yield, and a reduction in yield variability.

  14. Cloud Computing at the Tactical Edge

    DTIC Science & Technology

    2012-10-01

    Cloud Computing (CloudCom ’09). Bejing , China , December 2009. Springer-Verlag, 2009. [Marinelli 2009] Marinelli, E. Hyrax: Cloud Computing on Mobile...offloading is appropriate. Each applica- tion overlay is generated from the same Base VM Image that resides in the cloudlet. In an opera - tional setting...overlay, the following opera - tions execute: 1. The overlay is decompressed using the tools listed in Section 4.2. 2. VM synthesis is performed through

  15. High-volume manufacturing device overlay process control

    NASA Astrophysics Data System (ADS)

    Lee, Honggoo; Han, Sangjun; Woo, Jaeson; Lee, DongYoung; Song, ChangRock; Heo, Hoyoung; Brinster, Irina; Choi, DongSub; Robinson, John C.

    2017-03-01

    Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay metrology is performed on metrology targets on a high frequency basis including every lot (or most lots) at DI. SEM based FI metrology is performed ondevice in-die as-etched on an infrequent basis. Hybrid control schemes of this type have been in use for many process nodes. What is new is the relative size of the NZO as compared to the overlay spec, and the need to find more comprehensive solutions to characterize and control the size and variability of NZO at the 1x nm node: sampling, modeling, temporal frequency and control aspects, as well as trade-offs between SEM throughput and accuracy.

  16. Modeling of profilometry with laser focus sensors

    NASA Astrophysics Data System (ADS)

    Bischoff, Jörg; Manske, Eberhard; Baitinger, Henner

    2011-05-01

    Metrology is of paramount importance in submicron patterning. Particularly, line width and overlay have to be measured very accurately. Appropriated metrology techniques are scanning electron microscopy and optical scatterometry. The latter is non-invasive, highly accurate and enables optical cross sections of layer stacks but it requires periodic patterns. Scanning laser focus sensors are a viable alternative enabling the measurement of non-periodic features. Severe limitations are imposed by the diffraction limit determining the edge location accuracy. It will be shown that the accuracy can be greatly improved by means of rigorous modeling. To this end, a fully vectorial 2.5-dimensional model has been developed based on rigorous Maxwell solvers and combined with models for the scanning and various autofocus principles. The simulations are compared with experimental results. Moreover, the simulations are directly utilized to improve the edge location accuracy.

  17. Hydroxyapatite crystals biologically inspired on titanium by using an organic template based on the copolymer of acrylic acid and itaconic acid.

    PubMed

    Zhang, Chao; Li, Zhi-An; Cheng, Xiang-Rong; Xiao, Qun; Li, Hong-Bo

    2010-01-01

    Hydroxyapatite coating on metal implants is an effective method to enhance bioactive properties of the metal surface. We report here a method to coat the Ti-6Al-4V alloy with hydroxyapatite crystals. After alkaline/heat treatment, the spontaneous growth of organoapatite on titanium alloy surface involves sequential preadsorption of titanium isopropoxide (TIPO) and the copolymer of acrylic acid and itaconic acid on the metal, followed by exposure to simulated body fluid (SBF). The organoapatite characterization of the coating was carried out by scanning electron microscopy, energy dispersive spectrometer, and X-ray diffraction. The copolymer of acrylic acid and itaconic acid overlayer which is rich of carboxylate groups can lead to the deposition of needle-like and homogeneous HA on the surface after immersion in SBF.

  18. Improved antifouling properties and selective biofunctionalization of stainless steel by employing heterobifunctional silane-polyethylene glycol overlayers and avidin-biotin technology

    PubMed Central

    Hynninen, Ville; Vuori, Leena; Hannula, Markku; Tapio, Kosti; Lahtonen, Kimmo; Isoniemi, Tommi; Lehtonen, Elina; Hirsimäki, Mika; Toppari, J. Jussi; Valden, Mika; Hytönen, Vesa P.

    2016-01-01

    A straightforward solution-based method to modify the biofunctionality of stainless steel (SS) using heterobifunctional silane-polyethylene glycol (silane-PEG) overlayers is reported. Reduced nonspecific biofouling of both proteins and bacteria onto SS and further selective biofunctionalization of the modified surface were achieved. According to photoelectron spectroscopy analyses, the silane-PEGs formed less than 10 Å thick overlayers with close to 90% surface coverage and reproducible chemical compositions. Consequently, the surfaces also became more hydrophilic, and the observed non-specific biofouling of proteins was reduced by approximately 70%. In addition, the attachment of E. coli was reduced by more than 65%. Moreover, the potential of the overlayer to be further modified was demonstrated by successfully coupling biotinylated alkaline phosphatase (bAP) to a silane-PEG-biotin overlayer via avidin-biotin bridges. The activity of the immobilized enzyme was shown to be well preserved without compromising the achieved antifouling properties. Overall, the simple solution-based approach enables the tailoring of SS to enhance its activity for biomedical and biotechnological applications. PMID:27381834

  19. Improved antifouling properties and selective biofunctionalization of stainless steel by employing heterobifunctional silane-polyethylene glycol overlayers and avidin-biotin technology

    NASA Astrophysics Data System (ADS)

    Hynninen, Ville; Vuori, Leena; Hannula, Markku; Tapio, Kosti; Lahtonen, Kimmo; Isoniemi, Tommi; Lehtonen, Elina; Hirsimäki, Mika; Toppari, J. Jussi; Valden, Mika; Hytönen, Vesa P.

    2016-07-01

    A straightforward solution-based method to modify the biofunctionality of stainless steel (SS) using heterobifunctional silane-polyethylene glycol (silane-PEG) overlayers is reported. Reduced nonspecific biofouling of both proteins and bacteria onto SS and further selective biofunctionalization of the modified surface were achieved. According to photoelectron spectroscopy analyses, the silane-PEGs formed less than 10 Å thick overlayers with close to 90% surface coverage and reproducible chemical compositions. Consequently, the surfaces also became more hydrophilic, and the observed non-specific biofouling of proteins was reduced by approximately 70%. In addition, the attachment of E. coli was reduced by more than 65%. Moreover, the potential of the overlayer to be further modified was demonstrated by successfully coupling biotinylated alkaline phosphatase (bAP) to a silane-PEG-biotin overlayer via avidin-biotin bridges. The activity of the immobilized enzyme was shown to be well preserved without compromising the achieved antifouling properties. Overall, the simple solution-based approach enables the tailoring of SS to enhance its activity for biomedical and biotechnological applications.

  20. Evaluation of Some Finishing Properties of Oil Palm Particleboard for Furniture Application

    NASA Astrophysics Data System (ADS)

    Ratnasingam, J.; Nyugen, V.; Ioras, F.

    The finishing properties of particleboard made from the Empty-Fruit Bunch (EFB) of oil palm (Elaeis guineensis Jacq.) were evaluated for its suitability for furniture applications, using different coating and overlay materials. The results found that the thick plastic-formica overlay provided the best surface finish, in terms of surface smoothness, adhesion strength and impact resistance. Although the polyurethane lacquer provided an acceptable finish, its quality and performance is not comparable to that of the thick plastic overlay. Despite the fact that the use of such overlay material may render the material not aesthetically appealing and limit it to concealed applications or where the thick overlay material is tolerated, its cost competitiveness and environmental friendliness may be able to position the oil palm particleboard as a substitute for the conventional wood-based particleboard in the furniture manufacturing industry.

  1. Assessment and prediction of drying shrinkage cracking in bonded mortar overlays

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Beushausen, Hans, E-mail: hans.beushausen@uct.ac.za; Chilwesa, Masuzyo

    2013-11-15

    Restrained drying shrinkage cracking was investigated on composite beams consisting of substrate concrete and bonded mortar overlays, and compared to the performance of the same mortars when subjected to the ring test. Stress development and cracking in the composite specimens were analytically modeled and predicted based on the measurement of relevant time-dependent material properties such as drying shrinkage, elastic modulus, tensile relaxation and tensile strength. Overlay cracking in the composite beams could be very well predicted with the analytical model. The ring test provided a useful qualitative comparison of the cracking performance of the mortars. The duration of curing wasmore » found to only have a minor influence on crack development. This was ascribed to the fact that prolonged curing has a beneficial effect on tensile strength at the onset of stress development, but is in the same time not beneficial to the values of tensile relaxation and elastic modulus. -- Highlights: •Parameter study on material characteristics influencing overlay cracking. •Analytical model gives good quantitative indication of overlay cracking. •Ring test presents good qualitative indication of overlay cracking. •Curing duration has little effect on overlay cracking.« less

  2. Design of overlays based on pavement condition, roughness, and deflections : part 1 : tentative method for overlay design based on visual pavement distress.

    DOT National Transportation Integrated Search

    1978-01-01

    Data collected on 111 interstate highway projects in Virginia were analyzed by multi-regression analysis and the rating coefficient for each type of distress determined. By this means, the total pavement distress and, hence, the maintenance rating of...

  3. Overlay accuracy on a flexible web with a roll printing process based on a roll-to-roll system.

    PubMed

    Chang, Jaehyuk; Lee, Sunggun; Lee, Ki Beom; Lee, Seungjun; Cho, Young Tae; Seo, Jungwoo; Lee, Sukwon; Jo, Gugrae; Lee, Ki-yong; Kong, Hyang-Shik; Kwon, Sin

    2015-05-01

    For high-quality flexible devices from printing processes based on Roll-to-Roll (R2R) systems, overlay alignment during the patterning of each functional layer poses a major challenge. The reason is because flexible substrates have a relatively low stiffness compared with rigid substrates, and they are easily deformed during web handling in the R2R system. To achieve a high overlay accuracy for a flexible substrate, it is important not only to develop web handling modules (such as web guiding, tension control, winding, and unwinding) and a precise printing tool but also to control the synchronization of each unit in the total system. A R2R web handling system and reverse offset printing process were developed in this work, and an overlay between the 1st and 2nd layers of ±5μm on a 500 mm-wide film was achieved at a σ level of 2.4 and 2.8 (x and y directions, respectively) in a continuous R2R printing process. This paper presents the components and mechanisms used in reverse offset printing based on a R2R system and the printing results including positioning accuracy and overlay alignment accuracy.

  4. The performances of different overlay mark types at 65nm node on 300-mm wafers

    NASA Astrophysics Data System (ADS)

    Tseng, H. T.; Lin, Ling-Chieh; Huang, I. H.; Lin, Benjamin S.; Huang, Chin-Chou K.; Huang, Chien-Jen

    2005-05-01

    The integrated circuit (IC) manufacturing factories have measured overlay with conventional "box-in-box" (BiB) or "frame-in-frame" (FiF) structures for many years. Since UMC played as a roll of world class IC foundry service provider, tighter and tighter alignment accuracy specs need to be achieved from generation to generation to meet any kind of customers' requirement, especially according to International Technology Roadmap for Semiconductors (ITRS) 2003 METROLOGY section1. The process noises resulting from dishing, overlay mark damaging by chemical mechanism polishing (CMP), and the variation of film thickness during deposition are factors which can be very problematic in mark alignment. For example, the conventional "box-in-box" overlay marks could be damaged easily by CMP, because the less local pattern density and wide feature width of the box induce either dishing or asymmetric damages for the measurement targets, which will make the overlay measurement varied and difficult. After Advanced Imaging Metrology (AIM) overlay targets was introduced by KLA-Tencor, studies in the past shown AIM was more robust in overlay metrology than conventional FiF or BiB targets. In this study, the applications of AIM overlay marks under different process conditions will be discussed and compared with the conventional overlay targets. To evaluate the overlay mark performance against process variation on 65nm technology node in 300-mm wafer, three critical layers were chosen in this study. These three layers were Poly, Contact, and Cu-Metal. The overlay targets used for performance comparison were BiB and Non-Segmented AIM (NS AIM) marks. We compared the overlay mark performance on two main areas. The first one was total measurement uncertainty (TMU)3 related items that include Tool Induced Shift (TIS) variability, precision, and matching. The other area is the target robustness against process variations. Based on the present study AIM mark demonstrated an equal or better performance in the TMU related items under our process conditions. However, when non-optimized tungsten CMP was introduced in the tungsten contact process, due to the dense grating line structure design, we found that AIM mark was much more robust than BiB overlay target.

  5. On Adding Structure to Unstructured Overlay Networks

    NASA Astrophysics Data System (ADS)

    Leitão, João; Carvalho, Nuno A.; Pereira, José; Oliveira, Rui; Rodrigues, Luís

    Unstructured peer-to-peer overlay networks are very resilient to churn and topology changes, while requiring little maintenance cost. Therefore, they are an infrastructure to build highly scalable large-scale services in dynamic networks. Typically, the overlay topology is defined by a peer sampling service that aims at maintaining, in each process, a random partial view of peers in the system. The resulting random unstructured topology is suboptimal when a specific performance metric is considered. On the other hand, structured approaches (for instance, a spanning tree) may optimize a given target performance metric but are highly fragile. In fact, the cost for maintaining structures with strong constraints may easily become prohibitive in highly dynamic networks. This chapter discusses different techniques that aim at combining the advantages of unstructured and structured networks. Namely we focus on two distinct approaches, one based on optimizing the overlay and another based on optimizing the gossip mechanism itself.

  6. Overlay design method based on visual pavement distress.

    DOT National Transportation Integrated Search

    1978-01-01

    A method for designing the thickness of overlays for bituminous concrete pavements in Virginia is described. In this method the thickness is calculated by rating the amount and severity of observed pavement distress and determining the total accumula...

  7. 14 CFR 93.176 - Description of area.

    Code of Federal Regulations, 2010 CFR

    2010-01-01

    ... base of the overlaying Phoenix Class B airspace bounded by a line beginning at: Lat. 33°23′56″ N; Long...) South section lower includes airspace extending from 2,100 feet MSL to the base of the overlaying Phoenix Class B airspace, excluding the Luke Class D airspace area bounded by a line beginning at: Lat. 33...

  8. Evaluation of Geosynthetics in Asphalt Overlays of Jointed Concrete Pavements

    DOT National Transportation Integrated Search

    2000-06-01

    This report presents the findings and recommendations based on the Evaluation of Geosynthetics in Asphalt Overlays of Jointed Concrete Pavements. This project evaluated Linq Tac-711N and Strata Grid-200's ability to ease distress and reflective crack...

  9. On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections

    NASA Astrophysics Data System (ADS)

    Bhattacharyya, Kaustuve; Ke, Chih-Ming; Huang, Guo-Tsai; Chen, Kai-Hsiung; Smilde, Henk-Jan H.; Fuchs, Andreas; Jak, Martin; van Schijndel, Mark; Bozkurt, Murat; van der Schaar, Maurits; Meyer, Steffen; Un, Miranda; Morgan, Stephen; Wu, Jon; Tsai, Vincent; Liang, Frida; den Boef, Arie; ten Berge, Peter; Kubis, Michael; Wang, Cathy; Fouquet, Christophe; Terng, L. G.; Hwang, David; Cheng, Kevin; Gau, TS; Ku, Y. C.

    2013-04-01

    Aggressive on-product overlay requirements in advanced nodes are setting a superior challenge for the semiconductor industry. This forces the industry to look beyond the traditional way-of-working and invest in several new technologies. Integrated metrology2, in-chip overlay control, advanced sampling and process correction-mechanism (using the highest order of correction possible with scanner interface today), are a few of such technologies considered in this publication.

  10. Overlay improvements using a real time machine learning algorithm

    NASA Astrophysics Data System (ADS)

    Schmitt-Weaver, Emil; Kubis, Michael; Henke, Wolfgang; Slotboom, Daan; Hoogenboom, Tom; Mulkens, Jan; Coogans, Martyn; ten Berge, Peter; Verkleij, Dick; van de Mast, Frank

    2014-04-01

    While semiconductor manufacturing is moving towards the 14nm node using immersion lithography, the overlay requirements are tightened to below 5nm. Next to improvements in the immersion scanner platform, enhancements in the overlay optimization and process control are needed to enable these low overlay numbers. Whereas conventional overlay control methods address wafer and lot variation autonomously with wafer pre exposure alignment metrology and post exposure overlay metrology, we see a need to reduce these variations by correlating more of the TWINSCAN system's sensor data directly to the post exposure YieldStar metrology in time. In this paper we will present the results of a study on applying a real time control algorithm based on machine learning technology. Machine learning methods use context and TWINSCAN system sensor data paired with post exposure YieldStar metrology to recognize generic behavior and train the control system to anticipate on this generic behavior. Specific for this study, the data concerns immersion scanner context, sensor data and on-wafer measured overlay data. By making the link between the scanner data and the wafer data we are able to establish a real time relationship. The result is an inline controller that accounts for small changes in scanner hardware performance in time while picking up subtle lot to lot and wafer to wafer deviations introduced by wafer processing.

  11. Image overlay solution based on threshold detection for a compact near infrared fluorescence goggle system

    NASA Astrophysics Data System (ADS)

    Gao, Shengkui; Mondal, Suman B.; Zhu, Nan; Liang, RongGuang; Achilefu, Samuel; Gruev, Viktor

    2015-01-01

    Near infrared (NIR) fluorescence imaging has shown great potential for various clinical procedures, including intraoperative image guidance. However, existing NIR fluorescence imaging systems either have a large footprint or are handheld, which limits their usage in intraoperative applications. We present a compact NIR fluorescence imaging system (NFIS) with an image overlay solution based on threshold detection, which can be easily integrated with a goggle display system for intraoperative guidance. The proposed NFIS achieves compactness, light weight, hands-free operation, high-precision superimposition, and a real-time frame rate. In addition, the miniature and ultra-lightweight light-emitting diode tracking pod is easy to incorporate with NIR fluorescence imaging. Based on experimental evaluation, the proposed NFIS solution has a lower detection limit of 25 nM of indocyanine green at 27 fps and realizes a highly precise image overlay of NIR and visible images of mice in vivo. The overlay error is limited within a 2-mm scale at a 65-cm working distance, which is highly reliable for clinical study and surgical use.

  12. Managing Network Partitions in Structured P2P Networks

    NASA Astrophysics Data System (ADS)

    Shafaat, Tallat M.; Ghodsi, Ali; Haridi, Seif

    Structured overlay networks form a major class of peer-to-peer systems, which are touted for their abilities to scale, tolerate failures, and self-manage. Any long-lived Internet-scale distributed system is destined to face network partitions. Consequently, the problem of network partitions and mergers is highly related to fault-tolerance and self-management in large-scale systems. This makes it a crucial requirement for building any structured peer-to-peer systems to be resilient to network partitions. Although the problem of network partitions and mergers is highly related to fault-tolerance and self-management in large-scale systems, it has hardly been studied in the context of structured peer-to-peer systems. Structured overlays have mainly been studied under churn (frequent joins/failures), which as a side effect solves the problem of network partitions, as it is similar to massive node failures. Yet, the crucial aspect of network mergers has been ignored. In fact, it has been claimed that ring-based structured overlay networks, which constitute the majority of the structured overlays, are intrinsically ill-suited for merging rings. In this chapter, we motivate the problem of network partitions and mergers in structured overlays. We discuss how a structured overlay can automatically detect a network partition and merger. We present an algorithm for merging multiple similar ring-based overlays when the underlying network merges. We examine the solution in dynamic conditions, showing how our solution is resilient to churn during the merger, something widely believed to be difficult or impossible. We evaluate the algorithm for various scenarios and show that even when falsely detecting a merger, the algorithm quickly terminates and does not clutter the network with many messages. The algorithm is flexible as the tradeoff between message complexity and time complexity can be adjusted by a parameter.

  13. X-ray photoelectron-diffraction study of intermixing and morphology at the Ge/Si(001) and Ge/Sb/Si(001) interface

    NASA Astrophysics Data System (ADS)

    Gunnella, R.; Castrucci, P.; Pinto, N.; Davoli, I.; Sébilleau, D.; de Crescenzi, M.

    1996-09-01

    We used the XPD (x-ray photoelectron diffraction) and AED (Auger electron diffraction) from Ge core levels to probe the crystalline structure of 3 and 6 ML of Ge epitaxially grown by molecular-beam epitaxy on the Si(001) surface. In order to check the film tetragonal distortion and the pseudomorphic growth morphology, we used two different temperatures of the substrate during the deposition: room temperature and 400 °C. Evidence for an interfacial intermixing has been found by means of the observation of the angular behavior of the intensity of the emitted electrons. We also investigated the effects of Sb as a surfactant on such an interface. In this case indications of a laminar growth of strained Ge overlayer with reduced intermixing is obtained when 1 ML of Sb is predeposited on the substrate. Furthermore making use of a multiple-scattering approach to reproduce the experimental XPD patterns, a higher amount of accessible information on the morphology of the interface, beyond the determination of the strain content, is obtained.

  14. Growth and structural evolution of Sn on Ag(001): Epitaxial monolayer to thick alloy film

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Chakraborty, Suvankar; Menon, Krishnakumar S. R., E-mail: krishna.menon@saha.ac.in

    The growth and structure of Sn on Ag(001), from submonolayer to thick film coverages at room temperature, are studied using low energy electron diffraction, x-ray photoemission spectroscopy and angle-resolved photoemission spectroscopy (ARPES) techniques. The authors observe different growth modes for submonolayer Sn coverages and for higher Sn coverages. Systematic surface structural evolution, consistent with the substitution of surface Ag atoms by Sn atoms, is observed for submonolayer Sn coverages while an ordered Ag-Sn bulk alloy film is formed for higher Sn coverages with an Ag overlayer. For monolayer coverage of Sn, a pseudomorphic growth of a Sn layer without alloyingmore » is determined. ARPES results also confirm the presence of an ordered Ag overlayer on the bulk Ag-Sn alloy film, suggesting the formation of an Ag/Ag{sub 3}Sn/Ag(001) sandwich structure at the surface for higher Sn coverages. The present results illustrate the complex interplay of atomic mobilities, surface free-energies, and alloy formation energies in determining the growth and structural properties of the system.« less

  15. Fast 3D shape screening of large chemical databases through alignment-recycling

    PubMed Central

    Fontaine, Fabien; Bolton, Evan; Borodina, Yulia; Bryant, Stephen H

    2007-01-01

    Background Large chemical databases require fast, efficient, and simple ways of looking for similar structures. Although such tasks are now fairly well resolved for graph-based similarity queries, they remain an issue for 3D approaches, particularly for those based on 3D shape overlays. Inspired by a recent technique developed to compare molecular shapes, we designed a hybrid methodology, alignment-recycling, that enables efficient retrieval and alignment of structures with similar 3D shapes. Results Using a dataset of more than one million PubChem compounds of limited size (< 28 heavy atoms) and flexibility (< 6 rotatable bonds), we obtained a set of a few thousand diverse structures covering entirely the 3D shape space of the conformers of the dataset. Transformation matrices gathered from the overlays between these diverse structures and the 3D conformer dataset allowed us to drastically (100-fold) reduce the CPU time required for shape overlay. The alignment-recycling heuristic produces results consistent with de novo alignment calculation, with better than 80% hit list overlap on average. Conclusion Overlay-based 3D methods are computationally demanding when searching large databases. Alignment-recycling reduces the CPU time to perform shape similarity searches by breaking the alignment problem into three steps: selection of diverse shapes to describe the database shape-space; overlay of the database conformers to the diverse shapes; and non-optimized overlay of query and database conformers using common reference shapes. The precomputation, required by the first two steps, is a significant cost of the method; however, once performed, querying is two orders of magnitude faster. Extensions and variations of this methodology, for example, to handle more flexible and larger small-molecules are discussed. PMID:17880744

  16. Two-layer critical dimensions and overlay process window characterization and improvement in full-chip computational lithography

    NASA Astrophysics Data System (ADS)

    Sturtevant, John L.; Liubich, Vlad; Gupta, Rachit

    2016-04-01

    Edge placement error (EPE) was a term initially introduced to describe the difference between predicted pattern contour edge and the design target for a single design layer. Strictly speaking, this quantity is not directly measurable in the fab. What is of vital importance is the relative edge placement errors between different design layers, and in the era of multipatterning, the different constituent mask sublayers for a single design layer. The critical dimensions (CD) and overlay between two layers can be measured in the fab, and there has always been a strong emphasis on control of overlay between design layers. The progress in this realm has been remarkable, accelerated in part at least by the proliferation of multipatterning, which reduces the available overlay budget by introducing a coupling of overlay and CD errors for the target layer. Computational lithography makes possible the full-chip assessment of two-layer edge to edge distances and two-layer contact overlap area. We will investigate examples of via-metal model-based analysis of CD and overlay errors. We will investigate both single patterning and double patterning. For single patterning, we show the advantage of contour-to-contour simulation over contour to target simulation, and how the addition of aberrations in the optical models can provide a more realistic CD-overlay process window (PW) for edge placement errors. For double patterning, the interaction of 4-layer CD and overlay errors is very complex, but we illustrate that not only can full-chip verification identify potential two-layer hotspots, the optical proximity correction engine can act to mitigate such hotspots and enlarge the joint CD-overlay PW.

  17. Efforts to reduce reflective cracking of bituminous concrete overlays of Portland cement concrete pavements.

    DOT National Transportation Integrated Search

    1975-01-01

    Studies of efforts in Virginia to reduce the incidence of reflection cracking when portland cement concrete pavements or bases are overlayed with asphaltic concrete are reported. The methods of reflection crack reduction discussed are: (1) The use of...

  18. CIMS: The Cartographic Information Management System,

    DTIC Science & Technology

    1981-01-01

    information , composites of overlays to demonstrate the decision-making possibilities and slides of the cadastral sheet. System Use After data base ...create a national soils data base that can be used in managing the soil (Johnson, 1979). Small-scale information systems can be used in planning the...maps/charts over the base map, etc.). An example of the manual phase to be found in the literature is the Overlay Information System used in Prince

  19. Distributed fiber optic sensor-enhanced detection and prediction of shrinkage-induced delamination of ultra-high-performance concrete overlay

    NASA Astrophysics Data System (ADS)

    Bao, Yi; Valipour, Mahdi; Meng, Weina; Khayat, Kamal H.; Chen, Genda

    2017-08-01

    This study develops a delamination detection system for smart ultra-high-performance concrete (UHPC) overlays using a fully distributed fiber optic sensor. Three 450 mm (length) × 200 mm (width) × 25 mm (thickness) UHPC overlays were cast over an existing 200 mm thick concrete substrate. The initiation and propagation of delamination due to early-age shrinkage of the UHPC overlay were detected as sudden increases and their extension in spatial distribution of shrinkage-induced strains measured from the sensor based on pulse pre-pump Brillouin optical time domain analysis. The distributed sensor is demonstrated effective in detecting delamination openings from microns to hundreds of microns. A three-dimensional finite element model with experimental material properties is proposed to understand the complete delamination process measured from the distributed sensor. The model is validated using the distributed sensor data. The finite element model with cohesive elements for the overlay-substrate interface can predict the complete delamination process.

  20. Spectral evolution with incremental nanocoating of long period fiber gratings

    NASA Astrophysics Data System (ADS)

    Del Villar, Ignacio; Corres, Jesus M.; Achaerandio, Miguel; Arregui, Francisco J.; Matias, Ignacio R.

    2006-12-01

    The incremental deposition of a thin overlay on the cladding of a long-period fiber grating (LPFG) induces important resonance wavelength shifts in the transmission spectrum. The phenomenon is proved theoretically with a vectorial method based on hybrid modes and coupled mode theory, and experimentally with electrostatic self-assembly monolayer process. The phenomenon is repeated periodically for specific overlay thickness values with the particularity that the shape of the resonance wavelength shift depends on the thickness of the overlay. The main applications are the design of wide optical filters and multiparameter sensing devices.

  1. A Microstructural Analysis of Orientation Variation in Epitaxial AlN on Si, Its Probable Origin, and Effect on Subsequent GaN Growth

    NASA Technical Reports Server (NTRS)

    Beye, R.; George, T.; Yang, J. W.; Khan, M. A.

    1996-01-01

    A structural examination of aluminum nitride growth on [111] silicon was carried out using transmission electron microscopy. Electron diffraction indicates that the basal planes of the wurtzitic overlayer mimic the orientation of the close-packed planes of the substrate. However, considerable, random rotation in the basal plane and random out-of-plane tilts were evident. This article examines these issues with a structural examination of AlN and GaN/AlN on silicon and compares the findings to those reported in the literature.

  2. Roll Casting of Aluminum Alloy Clad Strip

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Nakamura, R.; Tsuge, H.; Haga, T.

    2011-01-17

    Casting of aluminum alloy three layers of clad strip was tried using the two sets of twin roll casters, and effects of the casting parameters on the cladding conditions were investigated. One twin roll caster was mounted on the other twin roll caster. Base strip was 8079 aluminum alloy and overlay strips were 6022 aluminum alloy. Effects of roll-load of upper and lower casters and melt temperature of the lower caster were investigated. When the roll-load of the upper and lower caster was large enough, the overlay strip could be solidified and be connected. The overlay strip could be connectedmore » when the melt of the overlay strip cast by the lower caster was low enough. Sound three layers of clad strip could be cast by proper conditions.« less

  3. Intra-field on-product overlay improvement by application of RegC and TWINSCAN corrections

    NASA Astrophysics Data System (ADS)

    Sharoni, Ofir; Dmitriev, Vladimir; Graitzer, Erez; Perets, Yuval; Gorhad, Kujan; van Haren, Richard; Cekli, Hakki E.; Mulkens, Jan

    2015-03-01

    The on product overlay specification and Advanced Process Control (APC) is getting extremely challenging particularly after the introduction of multi-patterning applications like Spacer Assisted Double Patterning (SADP) and multipatterning techniques like N-repetitive Litho-Etch steps (LEN, N >= 2). When the latter is considered, most of the intrafield overlay contributors drop out of the overlay budget. This is a direct consequence of the fact that the scanner settings (like dose, illumination settings, etc.) as well as the subsequent processing steps can be made very similar for two consecutive Litho-Etch layers. The major overlay contributor that may require additional attention is the Image Placement Error (IPE). When the inter-layer overlay is considered, controlling the intra-field overlay contribution gets more complicated. In addition to the IPE contribution, the TWINSCANTM lens fingerprint in combination with the exposure settings is going to play a role as well. Generally speaking, two subsequent functional layers have different exposure settings. This results in a (non-reticle) additional overlay contribution. In this paper, we have studied the wafer overlay correction capability by RegC® in addition to the TWINSCANTM intrafield corrections to improve the on product overlay performance. RegC® is a reticle intra-volume laser writing technique that causes a predictable deformation element (RegC® deformation element) inside the quartz (Qz) material of a reticle. This technique enables to post-process an existing reticle to correct for instance for IPE. Alternatively, a pre-determined intra-field fingerprint can be added to the reticle such that it results in a straight field after exposure. This second application might be very powerful to correct for instance for (cold) lens fingerprints that cannot be corrected by the scanner itself. Another possible application is the intra-field processing fingerprint. One should realize that a RegC® treatment of a reticle generally results in global distortion of the reticle. This is not a problem as long as these global distortions can be corrected by the TWINSCANTM system (currently up to the third order). It is anticipated that the combination of the RegC® and the TWINSCANTM corrections act as complementary solutions. These solutions perfectly fit into the ASML Litho InSight (LIS) product in which feedforward and feedback corrections based on YieldStar overlay measurements are used to improve the on product overlay.

  4. Investigation of the weldability of iron-aluminum-chromium overlay coatings for corrosion protection in oxidizing/sulfidizing environments

    NASA Astrophysics Data System (ADS)

    Regina, Jonathan R.

    The current study investigated the effect of chromium additions on the hydrogen cracking susceptibility of Fe-Al weld overlay claddings containing chromium additions. It was found that the weldability of FeAlCr claddings was a function of both the aluminum and chromium concentrations of the weld coatings. Weld overlay compositions that were not susceptible to hydrogen cracking were identified and the underlying mechanism behind the hydrogen cracking phenomenon was investigated further. It was concluded that the cracking behavior of the FeAlCr welds depended strongly on the microstructure of the weld fusion zone. Although it was found that the cracking susceptibility was influenced by the presence of Fe-Al intermetallic phases (namely Fe3 Al and FeAl), the cracking behavior of FeAlCr weld overlay claddings also depended on the size and distribution of carbide and oxide particles present within the weld structure. These particles acted as hydrogen trapping sites, which are areas where free hydrogen segregates and can no longer contribute to the hydrogen embrittlement of the metal. It was determined that in practical applications of these FeAlCr weld overlay coatings, carbon should be present within these welds to reduce the amount of hydrogen available for hydrogen cracking. Based on the weldability results of the FeAlCr weld claddings, coating compositions that were able to be deposited crack-free were used for long-term corrosion testing in a simulated low NOx environment. These alloys were compared to a Ni-based superalloy (622), which is commonly utilized as boiler tube coatings in power plant furnaces for corrosion protection. It was found that the FeAlCr alloys demonstrated superior corrosion resistance when compared to the Ni-based superalloy. Due to the excellent long-term corrosion behavior of FeAlCr weld overlays that were immune to hydrogen cracking, it was concluded that select FeAlCr weld overlay compositions would make excellent corrosion resistant coatings for boiler tubes located in low NOx burning environments.

  5. A Comparison of Accuracy of Image- versus Hardware-based Tracking Technologies in 3D Fusion in Aortic Endografting.

    PubMed

    Rolls, A E; Maurel, B; Davis, M; Constantinou, J; Hamilton, G; Mastracci, T M

    2016-09-01

    Fusion of three-dimensional (3D) computed tomography and intraoperative two-dimensional imaging in endovascular surgery relies on manual rigid co-registration of bony landmarks and tracking of hardware to provide a 3D overlay (hardware-based tracking, HWT). An alternative technique (image-based tracking, IMT) uses image recognition to register and place the fusion mask. We present preliminary experience with an agnostic fusion technology that uses IMT, with the aim of comparing the accuracy of overlay for this technology with HWT. Data were collected prospectively for 12 patients. All devices were deployed using both IMT and HWT fusion assistance concurrently. Postoperative analysis of both systems was performed by three blinded expert observers, from selected time-points during the procedures, using the displacement of fusion rings, the overlay of vascular markings and the true ostia of renal arteries. The Mean overlay error and the deviation from mean error was derived using image analysis software. Comparison of the mean overlay error was made between IMT and HWT. The validity of the point-picking technique was assessed. IMT was successful in all of the first 12 cases, whereas technical learning curve challenges thwarted HWT in four cases. When independent operators assessed the degree of accuracy of the overlay, the median error for IMT was 3.9 mm (IQR 2.89-6.24, max 9.5) versus 8.64 mm (IQR 6.1-16.8, max 24.5) for HWT (p = .001). Variance per observer was 0.69 mm(2) and 95% limit of agreement ±1.63. In this preliminary study, the error of magnitude of displacement from the "true anatomy" during image overlay in IMT was less than for HWT. This confirms that ongoing manual re-registration, as recommended by the manufacturer, should be performed for HWT systems to maintain accuracy. The error in position of the fusion markers for IMT was consistent, thus may be considered predictable. Copyright © 2016 European Society for Vascular Surgery. Published by Elsevier Ltd. All rights reserved.

  6. Advances in process overlay on 300-mm wafers

    NASA Astrophysics Data System (ADS)

    Staecker, Jens; Arendt, Stefanie; Schumacher, Karl; Mos, Evert C.; van Haren, Richard J. F.; van der Schaar, Maurits; Edart, Remi; Demmerle, Wolfgang; Tolsma, Hoite

    2002-07-01

    Overlay budgets are getting tighter within 300 mm volume production and as a consequence the process effects on alignment and off-line metrology becomes more important. In a short loop experiment, with cleared reference marks in each image field, the isolated effect of processing was measured with a sub-nanometer accuracy. The examined processes are Shallow Trench Isolation (STI), Tungsten-Chemical Mechanical Processing (W-CMP) and resist spinning. The alignment measurements were done on an ASML TWINSCANT scanner and the off-line metrology measurements on a KLA Tencor. Mark type and mark position dependency of the process effects are analyzed. The mean plus 3 (sigma) of the maximum overlay after correcting batch average wafer parameters is used as an overlay performance indicator (OPI). 3 (sigma) residuals to the wafer-model are used as an indicator of the noise that is added by the process. The results are in agreement with existing knowledge of process effects on 200 mm wafers. The W-CMP process introduces an additional wafer rotation and scaling that is similar for alignment marks and metrology targets. The effects depend on the mark type; in general they get less severe for higher spatial frequencies. For a 7th order alignment mark, the OPI measured about 12 nm and the added noise about 12 nm. For the examined metrology targets the OPI is about 20 nm with an added noise of about 90 nm. Two different types of alignment marks were tested in the STI process, i.e., zero layer marks and marks that were exposed together with the STI product. The overlay contribution due to processing on both types of alignment marks is very low (smaller than 5 nm OPI) and independent on mark type. Some flyers are observed fot the zero layer marks. The flyers can be explained by the residues of oxide and nitride that is left behind in the spaces of the alignment marks. Resist spinning is examined on single layer resist and resist with an organic Bottom Anti-Reflective Coating (BARC) underneath. Single layer resist showed scaling on unsegmented marks that disappears using higher diffraction orders and/or mark segmentation. Resist with a planarizing BARC caused additional effects on the wafer edge for measurements with the red laser signal. The effects disappear using the green laser of ATHENAT.

  7. Evaluation of the AISI 904L Alloy Weld Overlays Obtained by GMAW and Electro-Slag Welding Processes

    NASA Astrophysics Data System (ADS)

    Jorge, Jorge C. F.; Meira, O. G.; Madalena, F. C. A.; de Souza, L. F. G.; Araujo, L. S.; Mendes, M. C.

    2017-05-01

    The use of superaustenitic stainless steels (SASS) as an overlay replacement for nickel-based alloys can be an interesting alternative for the oil and gas industries, due to its lower cost, when compared to superalloys. Usually, the deposition is made with several welding passes by using conventional arc welding processes, such as gas tungsten arc welding (GTAW) or gas metal arc welding (GMAW) processes. In this respect, electro-slag welding (ESW), which promotes high heat inputs and low dilution of the welds, can also be attractive for this application, as it provides a higher productivity, once only one layer is needed for the deposition of the minimum thickness required. The present work evaluates the behavior of an AISI 904L SASS weld overlay deposited on a carbon steel ASTM A516 Grade 70 by ESW and GMAW processes. Both as-welded and heat-treated conditions were evaluated and compared. A multipass welding by GMAW process with three layers and 48 passes was performed on 12.5 × 200 × 250 mm steel plates with average welding energy of 1.0 kJ/mm. For ESW process, only one layer was deposited on 50 × 400 × 400 mm steel plates with average welding energy of 11.7 kJ/mm. After welding, a post-weld heat treatment (PWHT) at 620 °C for 10 h was performed in half of the steel plate, in order to allow the comparison between this condition and the as-welded one. For both processes, the austenitic microstructure of the weld deposits was characterized by optical microscopy and scanning electron microscopy with electron backscatter diffraction. A low proportion of secondary phases were observed in all conditions, and the PWHT did not promote significant changes on the hardness profile. Martensite for GMAW process and bainite for ESW process were the microstructural constituents observed at the coarse grain heat-affected zone, due to the different cooling rates. For ESW process, no evidences of partially diluted zones were found. As a consequence of the microstructural findings, the hardness results for ESW were lower than those usually observed for other electric arc welding processes. In addition, specimens subject to bending tests performed in accordance with the current standards used for qualification of welding procedures were approved. These evidences allow the conclusion that the ESW process can provide deposits with high quality despite the high welding energy levels, in order to achieve the desired productivity, being an interesting alternative for AISI 904L weld overlays.

  8. Approaches of multilayer overlay process control for 28nm FD-SOI derivative applications

    NASA Astrophysics Data System (ADS)

    Duclaux, Benjamin; De Caunes, Jean; Perrier, Robin; Gatefait, Maxime; Le Gratiet, Bertrand; Chapon, Jean-Damien; Monget, Cédric

    2018-03-01

    Derivative technology like embedded Non-Volatile Memories (eNVM) is raising new types of challenges on the "more than Moore" path. By its construction: overlay is critical across multiple layers, by its running mode: usage of high voltage are stressing leakages and breakdown, and finally with its targeted market: Automotive, Industry automation, secure transactions… which are all requesting high device reliability (typically below 1ppm level). As a consequence, overlay specifications are tights, not only between one layer and its reference, but also among the critical layers sharing the same reference. This work describes a broad picture of the key points for multilayer overlay process control in the case of a 28nm FD-SOI technology and its derivative flows. First, the alignment trees of the different flow options have been optimized using a realistic process assumptions calculation for indirect overlay. Then, in the case of a complex alignment tree involving heterogeneous scanner toolset, criticality of tool matching between reference layer and critical layers of the flow has been highlighted. Improving the APC control loops of these multilayer dependencies has been studied with simulations of feed-forward as well as implementing new rework algorithm based on multi-measures. Finally, the management of these measurement steps raises some issues for inline support and using calculations or "virtual overlay" could help to gain some tool capability. A first step towards multilayer overlay process control has been taken.

  9. Natural resources information system.

    NASA Technical Reports Server (NTRS)

    Leachtenauer, J. C.; Woll, A. M.

    1972-01-01

    A computer-based Natural Resources Information System was developed for the Bureaus of Indian Affairs and Land Management. The system stores, processes and displays data useful to the land manager in the decision making process. Emphasis is placed on the use of remote sensing as a data source. Data input consists of maps, imagery overlays, and on-site data. Maps and overlays are entered using a digitizer and stored as irregular polygons, lines and points. Processing functions include set intersection, union and difference and area, length and value computations. Data output consists of computer tabulations and overlays prepared on a drum plotter.

  10. KML Super Overlay to WMS Translator

    NASA Technical Reports Server (NTRS)

    Plesea, Lucian

    2007-01-01

    This translator is a server-based application that automatically generates KML super overlay configuration files required by Google Earth for map data access via the Open Geospatial Consortium WMS (Web Map Service) standard. The translator uses a set of URL parameters that mirror the WMS parameters as much as possible, and it also can generate a super overlay subdivision of any given area that is only loaded when needed, enabling very large areas of coverage at very high resolutions. It can make almost any dataset available as a WMS service visible and usable in any KML application, without the need to reformat the data.

  11. Crosslayer Survivability in Overlay-IP-WDM Networks

    ERIC Educational Resources Information Center

    Pacharintanakul, Peera

    2010-01-01

    As the Internet moves towards a three-layer architecture consisting of overlay networks on top of the IP network layer on top of WDM-based physical networks, incorporating the interaction between and among network layers is crucial for efficient and effective implementation of survivability. This dissertation has four major foci as follows:…

  12. Optical characterization of randomly microrough surfaces covered with very thin overlayers using effective medium approximation and Rayleigh-Rice theory

    NASA Astrophysics Data System (ADS)

    Ohlídal, Ivan; Vohánka, Jiří; Čermák, Martin; Franta, Daniel

    2017-10-01

    The modification of the effective medium approximation for randomly microrough surfaces covered by very thin overlayers based on inhomogeneous fictitious layers is formulated. The numerical analysis of this modification is performed using simulated ellipsometric data calculated using the Rayleigh-Rice theory. The system used to perform this numerical analysis consists of a randomly microrough silicon single crystal surface covered with a SiO2 overlayer. A comparison to the effective medium approximation based on homogeneous fictitious layers is carried out within this numerical analysis. For ellipsometry of the system mentioned above the possibilities and limitations of both the effective medium approximation approaches are discussed. The results obtained by means of the numerical analysis are confirmed by the ellipsometric characterization of two randomly microrough silicon single crystal substrates covered with native oxide overlayers. It is shown that the effective medium approximation approaches for this system exhibit strong deficiencies compared to the Rayleigh-Rice theory. The practical consequences implied by these results are presented. The results concerning the random microroughness are verified by means of measurements performed using atomic force microscopy.

  13. Evaluation of the Cargill SafeLane surface overlay.

    DOT National Transportation Integrated Search

    2009-01-01

    A recent development in polymer concrete overlays is the Cargill SafeLane surface overlay (SafeLane overlay). The 3/8-in-thick overlay is constructed with epoxy and broadcast aggregates, as are typical multiple-layer epoxy overlays that are used to p...

  14. Comparing the capitalisation benefits of light-rail transit and overlay zoning for single-family houses and condos by neighbourhood type in metropolitan Phoenix, Arizona.

    PubMed

    Atkinson-Palombo, Carol

    2010-01-01

    Light rail transit (LRT) is increasingly accompanied by overlay zoning which specifies the density and type of future development to encourage landscapes conducive to transit use. Neighbourhood type (based on land use mix) is used to partition data and investigate how pre-existing land use, treatment with a park-and-ride (PAR) versus walk-and-ride (WAR) station and overlay zoning interrelate. Hedonic models estimate capitalisation effects of LRT-related accessibility and overlay zoning on single-family houses and condos in different neighbourhoods for the system in metropolitan Phoenix, Arizona. Impacts differ by housing and neighbourhood type. Amenity-dominated mixed-use neighbourhoods-predominantly WAR communities-experience premiums of 6 per cent for single-family houses and over 20 per cent for condos, the latter boosted an additional 37 per cent by overlay zoning. Residential neighbourhoods-predominantly PAR communities-experience no capitalisation benefits for single-family houses and a discount for condos. The results suggest that land use mix is an important variable to select comparable neighbourhoods.

  15. A study and simulation of the impact of high-order aberrations to overlay error distribution

    NASA Astrophysics Data System (ADS)

    Sun, G.; Wang, F.; Zhou, C.

    2011-03-01

    With reduction of design rules, a number of corresponding new technologies, such as i-HOPC, HOWA and DBO have been proposed and applied to eliminate overlay error. When these technologies are in use, any high-order error distribution needs to be clearly distinguished in order to remove the underlying causes. Lens aberrations are normally thought to mainly impact the Matching Machine Overlay (MMO). However, when using Image-Based overlay (IBO) measurement tools, aberrations become the dominant influence on single machine overlay (SMO) and even on stage repeatability performance. In this paper, several measurements of the error distributions of the lens of SMEE SSB600/10 prototype exposure tool are presented. Models that characterize the primary influence from lens magnification, high order distortion, coma aberration and telecentricity are shown. The contribution to stage repeatability (as measured with IBO tools) from the above errors was predicted with simulator and compared to experiments. Finally, the drift of every lens distortion that impact to SMO over several days was monitored and matched with the result of measurements.

  16. Assessing the Crossdisciplinarity of Technology-Enhanced Learning with Science Overlay Maps and Diversity Measures

    ERIC Educational Resources Information Center

    Kalz, Marco; Specht, Marcus

    2014-01-01

    This paper deals with the assessment of the crossdisciplinarity of technology-enhanced learning (TEL). Based on a general discussion of the concept interdisciplinarity and a summary of the discussion in the field, two empirical methods from scientometrics are introduced and applied. Science overlay maps and the Rao-Stirling diversity index are…

  17. Cooperative Resource Pricing in Service Overlay Networks for Mobile Agents

    NASA Astrophysics Data System (ADS)

    Nakano, Tadashi; Okaie, Yutaka

    The success of peer-to-peer overlay networks depends on cooperation among participating peers. In this paper, we investigate the degree of cooperation among individual peers required to induce globally favorable properties in an overlay network. Specifically, we consider a resource pricing problem in a market-oriented overlay network where participating peers sell own resources (e.g., CPU cycles) to earn energy which represents some money or rewards in the network. In the resource pricing model presented in this paper, each peer sets the price for own resource based on the degree of cooperation; non-cooperative peers attempt to maximize their own energy gains, while cooperative peers maximize the sum of own and neighbors' energy gains. Simulation results are presented to demonstrate that the network topology is an important factor influencing the minimum degree of cooperation required to increase the network-wide global energy gain.

  18. Maxillary overlay removable partial dentures for the restoration of worn teeth.

    PubMed

    Fonseca, Júlio; Nicolau, Pedro; Daher, Tony

    2011-04-01

    Prolonged tooth maintenance by a more aged population considerably increases the probability of dentists having to treat patients with high levels of tooth wear. Pathological tooth wear, caused primarily by parafunction, seems to be a growing problem that affects a large number of adult patients. The clinical report presents a case of a partially edentulous patient with an elevated degree of wear in the upper jaw caused by attrition and erosion, rehabilitated with a maxillary overlay removable partial denture (ORPD) consisting of a chrome-cobalt (Cr-Co) framework with anterior acrylic resin veneers, posterior cast overlays, and acrylic resin denture bases. Removable partial prosthesis is a treatment alternative when teeth are found to be severely worn or when the patient needs a simple and economical option. Because economics is a conditional factor of the treatment, the clinician should present different treatment alternatives to the patient, in which the overlay prosthesis can be considered.

  19. Surface acoustic wave/silicon monolithic sensor/processor

    NASA Technical Reports Server (NTRS)

    Kowel, S. T.; Kornreich, P. G.; Nouhi, A.; Kilmer, R.; Fathimulla, M. A.; Mehter, E.

    1983-01-01

    A new technique for sputter deposition of piezoelectric zinc oxide (ZnO) is described. An argon-ion milling system was converted to sputter zinc oxide films in an oxygen atmosphere using a pure zinc oxide target. Piezoelectric films were grown on silicon dioxide and silicon dioxide overlayed with gold. The sputtered films were evaluated using surface acoustic wave measurements, X-ray diffraction, scanning electron microscopy, Auger electron spectroscopy, and resistivity measurements. The effect of the sputtering conditions on the film quality and the result of post-deposition annealing are discussed. The application of these films to the generation of surface acoustic waves is also discussed.

  20. Better Ohmic Contacts For InP Semiconductor Devices

    NASA Technical Reports Server (NTRS)

    Weizer, Victor G.; Fatemi, Navid S.

    1995-01-01

    Four design modifications enable fabrication of improved ohmic contacts on InP-based semiconductor devices. First modification consists of insertion of layer of gold phosphide between n-doped InP and metal or other overlayer of contact material. Second, includes first modification plus use of particular metal overlayer to achieve very low contact resistivities. Third, also involves deposition of Au(2)P(3) interlayer; in addition, refractory metal (W or Ta) deposited to form contact overlayer. In fourth, contact layer of Auln alloy deposited directly on InP. Improved contacts exhibit low electrical resistances and fabricated without exposing devices to destructive predeposition or postdeposition treatments.

  1. C-arm cone beam computed tomography needle path overlay for fluoroscopic guided vertebroplasty.

    PubMed

    Tam, Alda L; Mohamed, Ashraf; Pfister, Marcus; Chinndurai, Ponraj; Rohm, Esther; Hall, Andrew F; Wallace, Michael J

    2010-05-01

    Retrospective review. To report our early clinical experience using C-arm cone beam computed tomography (C-arm CBCT) with fluoroscopic overlay for needle guidance during vertebroplasty. C-arm CBCT is advanced three-dimensional (3-D) imaging technology that is currently available on state-of-the-art flat panel based angiography systems. The imaging information provided by C-arm CBCT allows for the acquisition and reconstruction of "CT-like" images in flat panel based angiography/interventional suites. As part of the evolution of this technology, enhancements allowing the overlay of cross-sectional imaging information can now be integrated with real time fluoroscopy. We report our early clinical experience with C-arm CBCT with fluoroscopic overlay for needle guidance during vertebroplasty. This is a retrospective review of 10 consecutive oncology patients who underwent vertebroplasty of 13 vertebral levels using C-arm CBCT with fluoroscopic overlay for needle guidance from November 2007 to December 2008. Procedural data including vertebral level, approach (transpedicular vs. extrapedicular), access (bilateral vs. unilateral) and complications were recorded. Technical success with the overlay technology was assessed based on accuracy which consisted of 4 measured parameters: distance from target to needle tip, distance from planned path to needle tip, distance from midline to needle tip, and distance from the anterior 1/3 of the vertebral body to needle tip. Success within each parameter required that the distance between the needle tip and parameter being evaluated be no more than 5 mm on multiplanar CBCT or fluoroscopy. Imaging data for 12 vertebral levels was available for review. All vertebral levels were treated using unilateral access and 9 levels were treated with an extrapedicular approach. Technical success rates were 92% for both distance from planned path and distance from midline to final needle tip, 100% when distance from needle tip to the anterior 1/3 border of the vertebral body was measured, and 75% when distance from target to needle tip was measured. There were no major complications. Minor complications consisted of 3 cases (25%) of cement extravasation. C-arm CBCT with needle path overlay for fluoroscopic guided vertebroplasty is feasible and allows for reliable unilateral therapy of both lumbar and thoracic vertebral bodies. Extrapedicular approaches were performed safely and with good accuracy of reaching the targets.

  2. How big does a coloured overlay have to be?

    PubMed

    Waldie, Michelle; Wilkins, Arnold

    2004-01-01

    Coloured overlays and coloured lenses can both increase reading speed, but when they do their colour is not necessarily the same, suggesting that the beneficial effects of a coloured filter might depend upon the area of the visual field that it colours. We investigated the effects of overlays on reading speed and varied the size of the overlay and the colour of the surround. Children who had been assessed with coloured overlays were required to read a passage of randomly ordered common words. The words were printed in black ink as a block of text positioned centrally on an A4 page of white paper in landscape orientation. The speed of reading was compared under four conditions: (1) without an overlay; (2) with an overlay of the chosen colour covering the entire page; (3) with the overlay cut so that it just covered the text but left the margin white; (4) with the overlay of the chosen colour covering the text but with the margin coloured a complementary colour, using a second overlay. The children who were using an overlay read more quickly with the overlay; those who were no longer using the overlay did not. Although the block of text covered less than half the page, the colour and nature of the margin did not affect reading speed significantly. These findings suggest that in order to be effective at improving reading speed an overlay needs to cover the text, but not necessarily the remainder of the page, which means that smaller overlays may sometimes be sufficient.

  3. Direct graphene growth on MgO: origin of the band gap.

    PubMed

    Gaddam, Sneha; Bjelkevig, Cameron; Ge, Siping; Fukutani, Keisuke; Dowben, Peter A; Kelber, Jeffry A

    2011-02-23

    A 2.5 monolayer (ML) thick graphene film grown by chemical vapor deposition of thermally dissociated C(2)H(4) on MgO(111), displays a significant band gap. The apparent six-fold low energy electron diffraction (LEED) pattern actually consists of two three-fold patterns with different 'A' and 'B' site diffraction intensities. Similar effects are observed for the LEED patterns of a 1 ML carbon film derived from annealing adventitious carbon on MgO(111), and for a 1.5 ML thick graphene film grown by sputter deposition on the 1 ML film. The LEED data indicate different electron densities at the A and B sites of the graphene lattice, suggesting that the observed band gap results from lifting the graphene HOMO/LUMO degeneracy at the Dirac point. The data also indicate that disparities in A site/B site LEED intensities decrease with increasing carbon overlayer thickness, suggesting that the graphene band gap size decreases with increasing number of graphene layers on MgO(111). © 2011 IOP Publishing Ltd

  4. Strain relaxation in single crystal SrTiO3 grown on Si (001) by molecular beam epitaxy

    NASA Astrophysics Data System (ADS)

    Choi, Miri; Posadas, Agham; Dargis, Rytis; Shih, Chih-Kang; Demkov, Alexander A.; Triyoso, Dina H.; David Theodore, N.; Dubourdieu, Catherine; Bruley, John; Jordan-Sweet, Jean

    2012-03-01

    An epitaxial layer of SrTiO3 grown directly on Si may be used as a pseudo-substrate for the integration of perovskite oxides onto silicon. When SrTiO3 is initially grown on Si (001), it is nominally compressively strained. However, by subsequent annealing in oxygen at elevated temperature, an SiOx interlayer can be formed which alters the strain state of SrTiO3. We report a study of strain relaxation in SrTiO3 films grown on Si by molecular beam epitaxy as a function of annealing time and oxygen partial pressure. Using a combination of x-ray diffraction, reflection high energy electron diffraction, and transmission electron microscopy, we describe the process of interfacial oxidation and strain relaxation of SrTiO3 on Si (001). Understanding the process of strain relaxation of SrTiO3 on silicon will be useful for controlling the SrTiO3 lattice constant for lattice matching with functional oxide overlayers.

  5. Generating an Out-the-Window Cockpit Image with the iAPX 432.

    DTIC Science & Technology

    1982-12-01

    SUBJECT ISUBJECT 1 7 1 9 ISTARTING PARAMETER I INITIAL TEXT 1 8 110 IGENERATE LOCATION IEQUATION FLIGHT I11 I INFORMATION OVERLAY 1 13 IRETRIEVE DATA BASE...1 9 112 IDETERMINE SIGHTABLE ISIGHT DESCRIPTION 1 13 IRETRIEVE DATA BASEI 1 10 1 14 IGENERATE DISPLAY IPICTURE I11 1 10 IGENERATE LOCATION IEQOATION...IRETRIEVE DATA BASE I . 10 1 13 IGENERATE DISPLAY IPICTURE 1 11 1 9 IGENERATE LOCATION IEQOATION MOTION 1 12 1 10 INFORMATION OVERLAY IINFORMATION

  6. The Corrosion and Corrosion Fatigue Behavior of Nickel Based Alloy Weld Overlay and Coextruded Claddings

    NASA Astrophysics Data System (ADS)

    Stockdale, Andrew

    The use of low NOx boilers in coal fired power plants has resulted in sulfidizing corrosive conditions within the boilers and a reduction in the service lifetime of the waterwall tubes. As a solution to this problem, Ni-based weld overlays are used to provide the necessary corrosion resistance however; they are susceptible to corrosion fatigue. There are several metallurgical factors which give rise to corrosion fatigue that are associated with the localized melting and solidification of the weld overlay process. Coextruded coatings offer the potential for improved corrosion fatigue resistance since coextrusion is a solid state coating process. The corrosion and corrosion fatigue behavior of alloy 622 weld overlays and coextruded claddings was investigated using a Gleeble thermo-mechanical simulator retrofitted with a retort. The experiments were conducted at a constant temperature of 600°C using a simulated combustion gas of N2-10%CO-5%CO2-0.12%H 2S. An alternating stress profile was used with a minimum tensile stress of 0 MPa and a maximum tensile stress of 300 MPa (ten minute fatigue cycles). The results have demonstrated that the Gleeble can be used to successfully simulate the known corrosion fatigue cracking mechanism of Ni-based weld overlays in service. Multilayer corrosion scales developed on each of the claddings that consisted of inner and outer corrosion layers. The scales formed by the outward diffusion of cations and the inward diffusion of sulfur and oxygen anions. The corrosion fatigue behavior was influenced by the surface finish and the crack interactions. The initiation of a large number of corrosion fatigue cracks was not necessarily detrimental to the corrosion fatigue resistance. Finally, the as-received coextruded cladding exhibited the best corrosion fatigue resistance.

  7. An MR-based Model for Cardio-Respiratory Motion Compensation of Overlays in X-Ray Fluoroscopy

    PubMed Central

    Fischer, Peter; Faranesh, Anthony; Pohl, Thomas; Maier, Andreas; Rogers, Toby; Ratnayaka, Kanishka; Lederman, Robert; Hornegger, Joachim

    2017-01-01

    In X-ray fluoroscopy, static overlays are used to visualize soft tissue. We propose a system for cardiac and respiratory motion compensation of these overlays. It consists of a 3-D motion model created from real-time MR imaging. Multiple sagittal slices are acquired and retrospectively stacked to consistent 3-D volumes. Slice stacking considers cardiac information derived from the ECG and respiratory information extracted from the images. Additionally, temporal smoothness of the stacking is enhanced. Motion is estimated from the MR volumes using deformable 3-D/3-D registration. The motion model itself is a linear direct correspondence model using the same surrogate signals as slice stacking. In X-ray fluoroscopy, only the surrogate signals need to be extracted to apply the motion model and animate the overlay in real time. For evaluation, points are manually annotated in oblique MR slices and in contrast-enhanced X-ray images. The 2-D Euclidean distance of these points is reduced from 3.85 mm to 2.75 mm in MR and from 3.0 mm to 1.8 mm in X-ray compared to the static baseline. Furthermore, the motion-compensated overlays are shown qualitatively as images and videos. PMID:28692969

  8. Prospects of DUV OoB suppression techniques in EUV lithography

    NASA Astrophysics Data System (ADS)

    Park, Chang-Min; Kim, Insung; Kim, Sang-Hyun; Kim, Dong-Wan; Hwang, Myung-Soo; Kang, Soon-Nam; Park, Cheolhong; Kim, Hyun-Woo; Yeo, Jeong-Ho; Kim, Seong-Sue

    2014-04-01

    Though scaling of source power is still the biggest challenge in EUV lithography (EUVL) technology era, CD and overlay controls for transistor's requirement are also precondition of adopting EUVL in mass production. Two kinds of contributors are identified as risks for CDU and Overlay: Infrared (IR) and deep ultraviolet (DUV) out of band (OOB) radiations from laser produced plasma (LPP) EUV source. IR from plasma generating CO2 laser that causes optics heating and wafer overlay error is well suppressed by introducing grating on collector to diffract IR off the optical axis and is the effect has been confirmed by operation of pre-production tool (NXE3100). EUV and DUV OOB which are reflected from mask black boarder (BB) are root causes of EUV-specific CD error at the boundaries of exposed shots which would result in the problem of CDU out of spec unless sufficiently suppressed. Therefore, control of DUV OOB reflection from the mask BB is one of the key technologies that must be developed prior to EUV mass production. In this paper, quantitative assessment on the advantage and the disadvantage of potential OOB solutions will be discussed. EUV and DUV OOB impacts on wafer CDs are measured from NXE3100 & NXE3300 experiments. Significant increase of DUV OOB impact on CD from NXE3300 compared with NXE3100 is observed. There are three ways of technology being developed to suppress DUV OOB: spectral purity filter (SPF) as a scanner solution, multi-layer etching as a solution on mask, and resist top-coating as a process solution. PROs and CONs of on-scanner, on-mask, and on-resist solution for the mass production of EUV lithography will be discussed.

  9. Control of the axial coordination of a surface-confined manganese (III) porphyrin complex.

    PubMed

    Beggan, J P; Krasnikov, S A; Sergeeva, N N; Senge, M O; Cafolla, A A

    2012-06-15

    The organization and thermal lability of chloro(5,10,15,20-tetraphenyl porphyrinato)manganese(III) (Cl-MnTPP) molecules on the Ag(111) surface have been investigated under ultra-high vacuum conditions, using scanning tunnelling microscopy, low energy electron diffraction and x-ray photoelectron spectroscopy. The findings reveal the epitaxial nature of the molecule-substrate interface, and moreover, offer a valuable insight into the latent coordination properties of surface-confined metalloporphyrins. The Cl-MnTPP molecules are found to self-assemble on the Ag(111) surface at room temperature, forming an ordered molecular overlayer described by a square unit cell. In accordance with the threefold symmetry of the Ag(111) surface, three rotationally equivalent domains of the molecular overlayer are observed. The primitive lattice vectors of the Cl-MnTPP overlayer show an azimuthal rotation of ±15° relative to those of the Ag(111) surface, while the principal molecular axes of the individual molecules are found to be aligned with the substrate (0(-)11) and ((-)211) crystallographic directions. The axial chloride (Cl) ligand is found to be orientated away from the Ag(111) surface, whereby the average plane of the porphyrin macrocycle lies parallel to that of the substrate. When adsorbed on the Ag(111) surface, the Cl-MnTPP molecules display a latent thermal lability resulting in the dissociation of the axial Cl ligand at ~423 K. The thermally induced dissociation of the Cl ligand leaves the porphyrin complex otherwise intact, giving rise to the coordinatively unsaturated Mn(III) derivative. Consistent with the surface conformation of the Cl-MnTPP precursor, the resulting (5,10,15,20-tetraphenyl porphyrinato)manganese(III) (MnTPP) molecules display the same lattice structure and registry with the Ag(111) surface.

  10. Design and implementation of flexible TWDM-PON with PtP WDM overlay based on WSS for next-generation optical access networks

    NASA Astrophysics Data System (ADS)

    Wu, Bin; Yin, Hongxi; Qin, Jie; Liu, Chang; Liu, Anliang; Shao, Qi; Xu, Xiaoguang

    2016-09-01

    Aiming at the increasing demand of the diversification services and flexible bandwidth allocation of the future access networks, a flexible passive optical network (PON) scheme combining time and wavelength division multiplexing (TWDM) with point-to-point wavelength division multiplexing (PtP WDM) overlay is proposed for the next-generation optical access networks in this paper. A novel software-defined optical distribution network (ODN) structure is designed based on wavelength selective switches (WSS), which can implement wavelength and bandwidth dynamical allocations and suits for the bursty traffic. The experimental results reveal that the TWDM-PON can provide 40 Gb/s downstream and 10 Gb/s upstream data transmission, while the PtP WDM-PON can support 10 GHz point-to-point dedicated bandwidth as the overlay complement system. The wavelengths of the TWDM-PON and PtP WDM-PON are allocated dynamically based on WSS, which verifies the feasibility of the proposed structure.

  11. New possibilities for tuning ultrathin cobalt film magnetic properties by a noble metal overlayer.

    PubMed

    Kisielewski, M; Maziewski, A; Tekielak, M; Wawro, A; Baczewski, L T

    2002-08-19

    Complementary multiscale magneto-optical studies based on the polar Kerr effect are carried out on an ultrathin cobalt wedge covered with a silver wedge and subsequently with the Au thick layer. A few monolayers of Ag are found to have a substantial effect on magnetic anisotropy, the coercivity field, and Kerr rotation. The silver overlayer thickness-driven magnetic reorientation from easy axis to easy plane generates a new type of 90 degrees magnetic wall for cobalt thicknesses between 1.3 and 1.8 nm. The tuning of the wall width in a wide range is possible. Tailoring of the overlayer structure can be used for ultrathin film magnetic patterning.

  12. Trust models for efficient communication in Mobile Cloud Computing and their applications to e-Commerce

    NASA Astrophysics Data System (ADS)

    Pop, Florin; Dobre, Ciprian; Mocanu, Bogdan-Costel; Citoteanu, Oana-Maria; Xhafa, Fatos

    2016-11-01

    Managing the large dimensions of data processed in distributed systems that are formed by datacentres and mobile devices has become a challenging issue with an important impact on the end-user. Therefore, the management process of such systems can be achieved efficiently by using uniform overlay networks, interconnected through secure and efficient routing protocols. The aim of this article is to advance our previous work with a novel trust model based on a reputation metric that actively uses the social links between users and the model of interaction between them. We present and evaluate an adaptive model for the trust management in structured overlay networks, based on a Mobile Cloud architecture and considering a honeycomb overlay. Such a model can be useful for supporting advanced mobile market-share e-Commerce platforms, where users collaborate and exchange reliable information about, for example, products of interest and supporting ad-hoc business campaigns

  13. Structure Formation and Properties of Weld Overlay Produced by Laser Cladding under the Influence of Nanoparticles of High-melting Compounds

    NASA Astrophysics Data System (ADS)

    Murzakov, M.; Petrovskiy, V.; Birukov, V.; Dzhumaev, P.; Polski, V.; Markushov, Y.; Bykovskiy, D.

    Researches of flat samples using laser cladding technology were carried out. Nickel-based powders with the addition of nanopowders of tantalum carbide and tungsten carbide with water-based hydroxyethylcellulose as the binder, were used for slip cladding. Powders are fused on under local argon protection. The experiments were carried out to determine minimal base metal penetration depth, microhardness distribution over cross section of substrate and deposited layers, enrichment level of cladding metal with base components depending on power density and deposition rate. Metallographic studies of obtained overlays were conducted using a high-precision analytical equipment.

  14. Reducing overlay sampling for APC-based correction per exposure by replacing measured data with computational prediction

    NASA Astrophysics Data System (ADS)

    Noyes, Ben F.; Mokaberi, Babak; Oh, Jong Hun; Kim, Hyun Sik; Sung, Jun Ha; Kea, Marc

    2016-03-01

    One of the keys to successful mass production of sub-20nm nodes in the semiconductor industry is the development of an overlay correction strategy that can meet specifications, reduce the number of layers that require dedicated chuck overlay, and minimize measurement time. Three important aspects of this strategy are: correction per exposure (CPE), integrated metrology (IM), and the prioritization of automated correction over manual subrecipes. The first and third aspects are accomplished through an APC system that uses measurements from production lots to generate CPE corrections that are dynamically applied to future lots. The drawback of this method is that production overlay sampling must be extremely high in order to provide the system with enough data to generate CPE. That drawback makes IM particularly difficult because of the throughput impact that can be created on expensive bottleneck photolithography process tools. The goal is to realize the cycle time and feedback benefits of IM coupled with the enhanced overlay correction capability of automated CPE without impacting process tool throughput. This paper will discuss the development of a system that sends measured data with reduced sampling via an optimized layout to the exposure tool's computational modelling platform to predict and create "upsampled" overlay data in a customizable output layout that is compatible with the fab user CPE APC system. The result is dynamic CPE without the burden of extensive measurement time, which leads to increased utilization of IM.

  15. Polymer concrete overlay on SH-51, bridge deck

    NASA Astrophysics Data System (ADS)

    Borg, T. M.

    1982-06-01

    A thin resinous overlay was placed on a sound bridge deck in Oklahoma to evaluate its performance over one year using various physical tests. The evaluation shows how well the overlay protects the reinforcing steel from corrosion due to deicing salts. The steps leading to the construction of the overlay are detailed as well as the actual placing of the overlay. The results of various physical tests are reported for both before and after the overlay.

  16. Orthogonal Rings, Fiducial Markers, and Overlay Accuracy When Image Fusion is Used for EVAR Guidance.

    PubMed

    Koutouzi, G; Sandström, C; Roos, H; Henrikson, O; Leonhardt, H; Falkenberg, M

    2016-11-01

    Evaluation of orthogonal rings, fiducial markers, and overlay accuracy when image fusion is used for endovascular aortic repair (EVAR). This was a prospective single centre study. In 19 patients undergoing standard EVAR, 3D image fusion was used for intra-operative guidance. Renal arteries and targeted stent graft positions were marked with rings orthogonal to the respective centre lines from pre-operative computed tomography (CT). Radiopaque reference objects attached to the back of the patient were used as fiducial markers to detect patient movement intra-operatively. Automatic 3D-3D registration of the pre-operative CT with an intra-operative cone beam computed tomography (CBCT) as well as 3D-3D registration after manual alignment of nearby vertebrae were evaluated. Registration was defined as being sufficient for EVAR guidance if the deviation of the origin of the lower renal artery was less than 3 mm. For final overlay registration, the renal arteries were manually aligned using aortic calcification and vessel outlines. The accuracy of the overlay before stent graft deployment was evaluated using digital subtraction angiography (DSA) as direct comparison. Fiducial markers helped in detecting misalignment caused by patient movement during the procedure. Use of automatic intensity based registration alone was insufficient for EVAR guidance. Manual registration based on vertebrae L1-L2 was sufficient in 7/19 patients (37%). Using the final adjusted registration as overlay, the median alignment error of the lower renal artery marking at pre-deployment DSA was 2 mm (0-5) sideways and 2 mm (0-9) longitudinally, mostly in a caudal direction. 3D image fusion can facilitate intra-operative guidance during EVAR. Orthogonal rings and fiducial markers are useful for visualization and overlay correction. However, the accuracy of the overlaid 3D image is not always ideal and further technical development is needed. Copyright © 2016 European Society for Vascular Surgery. Published by Elsevier Ltd. All rights reserved.

  17. Pre-impact fall detection system using dynamic threshold and 3D bounding box

    NASA Astrophysics Data System (ADS)

    Otanasap, Nuth; Boonbrahm, Poonpong

    2017-02-01

    Fall prevention and detection system have to subjugate many challenges in order to develop an efficient those system. Some of the difficult problems are obtrusion, occlusion and overlay in vision based system. Other associated issues are privacy, cost, noise, computation complexity and definition of threshold values. Estimating human motion using vision based usually involves with partial overlay, caused either by direction of view point between objects or body parts and camera, and these issues have to be taken into consideration. This paper proposes the use of dynamic threshold based and bounding box posture analysis method with multiple Kinect cameras setting for human posture analysis and fall detection. The proposed work only uses two Kinect cameras for acquiring distributed values and differentiating activities between normal and falls. If the peak value of head velocity is greater than the dynamic threshold value, bounding box posture analysis will be used to confirm fall occurrence. Furthermore, information captured by multiple Kinect placed in right angle will address the skeleton overlay problem due to single Kinect. This work contributes on the fusion of multiple Kinect based skeletons, based on dynamic threshold and bounding box posture analysis which is the only research work reported so far.

  18. Improving P2P live-content delivery using SVC

    NASA Astrophysics Data System (ADS)

    Schierl, T.; Sánchez, Y.; Hellge, C.; Wiegand, T.

    2010-07-01

    P2P content delivery techniques for video transmission have become of high interest in the last years. With the involvement of client into the delivery process, P2P approaches can significantly reduce the load and cost on servers, especially for popular services. However, previous studies have already pointed out the unreliability of P2P-based live streaming approaches due to peer churn, where peers may ungracefully leave the P2P infrastructure, typically an overlay networks. Peers ungracefully leaving the system cause connection losses in the overlay, which require repair operations. During such repair operations, which typically take a few roundtrip times, no data is received from the lost connection. While taking low delay for fast-channel tune-in into account as a key feature for broadcast-like streaming applications, the P2P live streaming approach can only rely on a certain media pre-buffer during such repair operations. In this paper, multi-tree based Application Layer Multicast as a P2P overlay technique for live streaming is considered. The use of Flow Forwarding (FF), a.k.a. Retransmission, or Forward Error Correction (FEC) in combination with Scalable video Coding (SVC) for concealment during overlay repair operations is shown. Furthermore the benefits of using SVC over the use of AVC single layer transmission are presented.

  19. Development of an Overlay Design Procedure for Composite Pavements

    DOT National Transportation Integrated Search

    2017-09-01

    The composite overlay design procedure currently used by ODOT sometimes produces very large overlay thicknesses that are deemed structurally unnecessary, especially for composite pavements already with thick asphalt overlays. This study was initiated...

  20. Substrate effect on the growth of Sn thin films

    NASA Astrophysics Data System (ADS)

    Chakraborty, Suvankar; Menon, Krishnakumar S. R.

    2018-05-01

    Growth of tin (Sn) on Ag(001), Ag(111) and W(110) substrate has been studied at elevated temperatures (473 K) using x-ray photoemission spectroscopy (XPS) and low energy electron diffraction (LEED). For Sn growth on silver substrates, it is noticed that both Sn 3d and Ag 3d core-level spectra shift in the higher binding energy direction due to the formation of surface alloy with the substrate. In both cases, surface alloy finally transforms into bulk alloy finally reaching bulk Sn value. For Sn growth on W(110) only Sn 3d core-level spectra shift in the higher binding energy direction due to surface core-level effect whereas no shift for tungsten core-level was noticed confirming no alloy formation. Sn is incorporated into the surface of substrate silver layer by removing every alternate or every third silver atoms to relieve the surface tensile stress as confirmed by LEED. On the other hand, tungsten being hard, Sn forms an overlayer structure by sitting in different energetically available positions rather than forming an alloy as energetically also it is not possible. Sn forms alloy with soft substrate silver and form overlayer films with tungsten. These studies are important in understanding the growth mechanism of Sn films on metal substrates.

  1. A hybrid solution using computational prediction and measured data to accurately determine process corrections with reduced overlay sampling

    NASA Astrophysics Data System (ADS)

    Noyes, Ben F.; Mokaberi, Babak; Mandoy, Ram; Pate, Alex; Huijgen, Ralph; McBurney, Mike; Chen, Owen

    2017-03-01

    Reducing overlay error via an accurate APC feedback system is one of the main challenges in high volume production of the current and future nodes in the semiconductor industry. The overlay feedback system directly affects the number of dies meeting overlay specification and the number of layers requiring dedicated exposure tools through the fabrication flow. Increasing the former number and reducing the latter number is beneficial for the overall efficiency and yield of the fabrication process. An overlay feedback system requires accurate determination of the overlay error, or fingerprint, on exposed wafers in order to determine corrections to be automatically and dynamically applied to the exposure of future wafers. Since current and future nodes require correction per exposure (CPE), the resolution of the overlay fingerprint must be high enough to accommodate CPE in the overlay feedback system, or overlay control module (OCM). Determining a high resolution fingerprint from measured data requires extremely dense overlay sampling that takes a significant amount of measurement time. For static corrections this is acceptable, but in an automated dynamic correction system this method creates extreme bottlenecks for the throughput of said system as new lots have to wait until the previous lot is measured. One solution is using a less dense overlay sampling scheme and employing computationally up-sampled data to a dense fingerprint. That method uses a global fingerprint model over the entire wafer; measured localized overlay errors are therefore not always represented in its up-sampled output. This paper will discuss a hybrid system shown in Fig. 1 that combines a computationally up-sampled fingerprint with the measured data to more accurately capture the actual fingerprint, including local overlay errors. Such a hybrid system is shown to result in reduced modelled residuals while determining the fingerprint, and better on-product overlay performance.

  2. Study of correlation between overlay and displacement measured by Coherent Gradient Sensing (CGS) interferometry

    NASA Astrophysics Data System (ADS)

    Mileham, Jeffrey; Tanaka, Yasushi; Anberg, Doug; Owen, David M.; Lee, Byoung-Ho; Bouche, Eric

    2016-03-01

    Within the semiconductor lithographic process, alignment control is one of the most critical considerations. In order to realize high device performance, semiconductor technology is approaching the 10 nm design rule, which requires progressively smaller overlay budgets. Simultaneously, structures are expanding in the 3rd dimension, thereby increasing the potential for inter-layer distortion. For these reasons, device patterning is becoming increasingly difficult as the portion of the overlay budget attributed to process-induced variation increases. After lithography, overlay gives valuable feedback to the lithography tool; however overlay measurements typically have limited density, especially at the wafer edge, due to throughput considerations. Moreover, since overlay is measured after lithography, it can only react to, but not predict the process-induced overlay. This study is a joint investigation in a high-volume manufacturing environment of the portion of overlay associated with displacement induced by a single process across many chambers. Displacement measurements are measured by Coherent Gradient Sensing (CGS) interferometry, which generates high-density displacement maps (>3 million points on a 300 mm wafer) such that the stresses induced die-by-die and process-by-process can be tracked in detail. The results indicate the relationship between displacement and overlay shows the ability to forecast overlay values before the lithographic process. Details of the correlation including overlay/displacement range, and lot-to-lot displacement variability are considered.

  3. An Overlay Architecture for Throughput Optimal Multipath Routing

    DTIC Science & Technology

    2017-01-14

    1 An Overlay Architecture for Throughput Optimal Multipath Routing Nathaniel M. Jones, Georgios S. Paschos, Brooke Shrader, and Eytan Modiano...decisions. In this work, we study an overlay architecture for dynamic routing such that only a subset of devices (overlay nodes) need to make dynamic routing...a legacy network. Network overlays are frequently used to deploy new communication architectures in legacy networks [13]. To accomplish this, messages

  4. Implementation of Texas asphalt concrete overlay design system.

    DOT National Transportation Integrated Search

    2014-08-01

    An asphalt overlay design system was developed for Texas Department of Transportation (TxDOT) under : Research Project 0-5123. The new overlay design system, named the Texas Asphalt Concrete Overlay : Design System (TxACOL), can help pavement enginee...

  5. Statewide implementation of very thin overlays.

    DOT National Transportation Integrated Search

    2014-10-01

    Very thin overlays are defined as overlays where the final lift thickness is 1 inch or less. These are designed : to be high performance overlays in that they have to pass both a rutting (Hamburg Wheel tracking Test) and : reflection cracking (Overla...

  6. Defect modelling in an interactive 3-D CAD environment

    NASA Astrophysics Data System (ADS)

    Reilly, D.; Potts, A.; McNab, A.; Toft, M.; Chapman, R. K.

    2000-05-01

    This paper describes enhancement of the NDT Workbench, as presented at QNDE '98, to include theoretical models for the ultrasonic inspection of smooth planar defects, developed by British Energy and BNFL-Magnox Generation. The Workbench is a PC-based software package for the reconstruction, visualization and analysis of 3-D ultrasonic NDT data in an interactive CAD environment. This extension of the Workbeach now provides the user with a well established modelling approach, coupled with a graphical user interface for: a) configuring the model for flaw size, shape, orientation and location; b) flexible specification of probe parameters; c) selection of scanning surface and scan pattern on the CAD component model; d) presentation of the output as a simulated ultrasound image within the component, or as graphical or tabular displays. The defect modelling facilities of the Workbench can be used for inspection procedure assessment and confirmation of data interpretation, by comparison of overlay images generated from real and simulated data. The modelling technique currently implemented is based on the Geometrical Theory of Diffraction, for simulation of strip-like, circular or elliptical crack responses in the time harmonic or time dependent cases. Eventually, the Workbench will also allow modelling using elastodynamic Kirchhoff theory.

  7. Sol-Gel-Based Titania-Silica Thin Film Overlay for Long Period Fiber Grating-Based Biosensors.

    PubMed

    Chiavaioli, Francesco; Biswas, Palas; Trono, Cosimo; Jana, Sunirmal; Bandyopadhyay, Somnath; Basumallick, Nandini; Giannetti, Ambra; Tombelli, Sara; Bera, Susanta; Mallick, Aparajita; Baldini, Francesco

    2015-12-15

    An evanescent wave optical fiber biosensor based on titania-silica-coated long period grating (LPG) is presented. The chemical overlay, which increases the refractive index (RI) sensitivity of the sensor, consists of a sol-gel-based titania-silica thin film, deposited along the sensing portion of the fiber by means of the dip-coating technique. Changing both the sol viscosity and the withdrawal speed during the dip-coating made it possible to adjust the thickness of the film overlay, which is a crucial parameter for the sensor performance. After the functionalization of the fiber surface using a methacrylic acid/methacrylate copolymer, an antibody/antigen (IgG/anti-IgG) assay was carried out to assess the performance of sol-gel based titania-silica-coated LPGs as biosensors. The analyte concentration was determined from the wavelength shift at the end of the binding process and from the initial binding rate. This is the first time that a sol-gel based titania-silica-coated LPG is proposed as an effective and feasible label-free biosensor. The specificity of the sensor was validated by performing the same model assay after spiking anti-IgG into human serum. With this structured LPG, detection limits of the order of tens of micrograms per liter (10(-11) M) are attained.

  8. Atomic Beam Scattering Methods to Study Overlayer Structures and H-Surface Interaction Relevant to Astrophysics

    NASA Astrophysics Data System (ADS)

    Lin, Jingsu

    In this thesis we present results of experimental methods for studying surface structures of ultra-thin films and describe a new apparatus to study the recombination of atomic hydrogen on well characterized low temperature surface using atomic and molecular beam methods. We have used atomic beam scattering (ABS) to characterize the growth of mercury and lead overlayers on Cu(001) surface. The structures of ordered phases have been identified using ABS and low-energy electron diffraction (LEED). A model to analyze diffraction data from these phases is presented. The new apparatus we are going to describe includes a high performance atomic hydrogen source using radio-frequency (RF) dissociation. The dissociation efficiency can be as high as 90% in the optimized pressure range. An atomic hydrogen beam line has been added to our ultra-high vacuum (UHV) scattering apparatus. We have also designed and constructed a low temperature sample manipulator for experiments at liquid helium temperatures. The manipulator has one degree of freedom of rotation and the capability of heating the sample to 700K and cooling down to 12K. The first sample studied was a single graphite surface. We have used a He beam to characterize the sample surface and to monitor deposition of H on the sample surface in real time. A series of "adsorption curves" have been obtained at different temperature and doses. We found that at temperatures below 16K, both H and H_2 have formed a partial layer on the surface. From adsorption curve, we deduce that the initial sticking coefficient for H is about 0.06 when surface at 16K. When the H beam is interrupted, the He specularly reflected beam recovers partially, indicating that hydrogen atoms desorb, while others remain on the surface. The residual coverage of H is estimated to be about 2% of a monolayer.

  9. Efficacy of coloured overlays and lenses for treating reading difficulty: an overview of systematic reviews.

    PubMed

    Suttle, Catherine M; Lawrenson, John G; Conway, Miriam L

    2018-04-06

    Coloured overlays or lenses are widely available for use by children and adults with difficulties or discomfort while reading. In recent years, systematic reviews have been conducted in an attempt to establish the strength of the evidence base for this intervention. The aim of this overview is to systematically review these reviews. The methodology was published prospectively as a protocol (Prospero CRD42017059172). Online databases Medline, Cinahl, Embase and the Cochrane Library were searched for systematic reviews on the efficacy of coloured overlays or lenses for the alleviation of reading difficulty or discomfort. Included studies were appraised using the AMSTAR 2 checklist. Characteristics of included studies such as aspects of methods, results and conclusions were recorded. Both processes were conducted independently by two reviewers and any discrepancies were resolved by discussion. Thirty-one studies were found via databases and other sources. After excluding duplicates and those not fitting the inclusion criteria, four reviews were included in the analysis. While all reviews were systematic, their methodology, results and conclusions differed. Three of the four concluded that there is insufficient good quality evidence to support the use of coloured overlays or lenses for reading difficulty, while one concluded that, despite research limitations, the evidence does support their use. On balance, systematic reviews to date indicate that there is not yet a reliable evidence base on which to recommend coloured overlays or lenses for the alleviation of reading difficulty or discomfort. High quality, low bias research is needed to investigate their effectiveness in different forms of reading difficulty and discomfort for adults and children. © 2018 Optometry Australia.

  10. Microeconomics-based resource allocation in overlay networks by using non-strategic behavior modeling

    NASA Astrophysics Data System (ADS)

    Analoui, Morteza; Rezvani, Mohammad Hossein

    2011-01-01

    Behavior modeling has recently been investigated for designing self-organizing mechanisms in the context of communication networks in order to exploit the natural selfishness of the users with the goal of maximizing the overall utility. In strategic behavior modeling, the users of the network are assumed to be game players who seek to maximize their utility with taking into account the decisions that the other players might make. The essential difference between the aforementioned researches and this work is that it incorporates the non-strategic decisions in order to design the mechanism for the overlay network. In this solution concept, the decisions that a peer might make does not affect the actions of the other peers at all. The theory of consumer-firm developed in microeconomics is a model of the non-strategic behavior that we have adopted in our research. Based on it, we have presented distributed algorithms for peers' "joining" and "leaving" operations. We have modeled the overlay network as a competitive economy in which the content provided by an origin server can be viewed as commodity and the origin server and the peers who multicast the content to their downside are considered as the firms. On the other hand, due to the dual role of the peers in the overlay network, they can be considered as the consumers as well. On joining to the overlay economy, each peer is provided with an income and tries to get hold of the service regardless to the behavior of the other peers. We have designed the scalable algorithms in such a way that the existence of equilibrium price (known as Walrasian equilibrium price) is guaranteed.

  11. In-die photomask registration and overlay metrology with PROVE using 2D correlation methods

    NASA Astrophysics Data System (ADS)

    Seidel, D.; Arnz, M.; Beyer, D.

    2011-11-01

    According to the ITRS roadmap, semiconductor industry drives the 193nm lithography to its limits, using techniques like double exposure, double patterning, mask-source optimization and inverse lithography. For photomask metrology this translates to full in-die measurement capability for registration and critical dimension together with challenging specifications for repeatability and accuracy. Especially, overlay becomes more and more critical and must be ensured on every die. For this, Carl Zeiss SMS has developed the next generation photomask registration and overlay metrology tool PROVE® which serves the 32nm node and below and which is already well established in the market. PROVE® features highly stable hardware components for the stage and environmental control. To ensure in-die measurement capability, sophisticated image analysis methods based on 2D correlations have been developed. In this paper we demonstrate the in-die capability of PROVE® and present corresponding measurement results for shortterm and long-term measurements as well as the attainable accuracy for feature sizes down to 85nm using different illumination modes and mask types. Standard measurement methods based on threshold criteria are compared with the new 2D correlation methods to demonstrate the performance gain of the latter. In addition, mask-to-mask overlay results of typical box-in-frame structures down to 200nm feature size are presented. It is shown, that from overlay measurements a reproducibility budget can be derived that takes into account stage, image analysis and global effects like mask loading and environmental control. The parts of the budget are quantified from measurement results to identify critical error contributions and to focus on the corresponding improvement strategies.

  12. Employing overlayers to improve the performance of Cu 2BaSnS 4 thin film based photoelectrochemical water reduction devices

    DOE PAGES

    Ge, Jie; Roland, Paul J.; Koirala, Prakash; ...

    2017-01-19

    Earth-abundant copper-barium-thiostannate Cu 2BaSnS 4 (CBTS)-based thin films have recently been reported to exhibit the optoelectronic and defect properties suitable as absorbers for photoelectrochemical (PEC) water splitting and the top cell of tandem photovoltaic solar cells. However, the photocurrents of CBTS-based PEC devices are still much lower than the theoretical value, partially due to ineffective charge collection at CBTS/water interface and instability of CBTS in electrolytes. Here, we report on overcoming these issues by employing overlayer engineering. We find that CdS/ZnO/TiO 2 overlayers can significant-ly improve the PEC performance, achieving saturated cathodic photocurrents up to 7.8 mA cm -2 atmore » the potential of -0.10 V versus reversible hydrogen electrode (RHE) in a neutral electrolyte solution, which is much higher than the best bare CBTS film attaining a photocurrent of 4.8 mA cm -2 at the potential of -0.2 V versus RHE. Finally, our results suggest a viable approach for improving the performance of CBTS-based PEC cells.« less

  13. Virtual overlay metrology for fault detection supported with integrated metrology and machine learning

    NASA Astrophysics Data System (ADS)

    Lee, Hong-Goo; Schmitt-Weaver, Emil; Kim, Min-Suk; Han, Sang-Jun; Kim, Myoung-Soo; Kwon, Won-Taik; Park, Sung-Ki; Ryan, Kevin; Theeuwes, Thomas; Sun, Kyu-Tae; Lim, Young-Wan; Slotboom, Daan; Kubis, Michael; Staecker, Jens

    2015-03-01

    While semiconductor manufacturing moves toward the 7nm node for logic and 15nm node for memory, an increased emphasis has been placed on reducing the influence known contributors have toward the on product overlay budget. With a machine learning technique known as function approximation, we use a neural network to gain insight to how known contributors, such as those collected with scanner metrology, influence the on product overlay budget. The result is a sufficiently trained function that can approximate overlay for all wafers exposed with the lithography system. As a real world application, inline metrology can be used to measure overlay for a few wafers while using the trained function to approximate overlay vector maps for the entire lot of wafers. With the approximated overlay vector maps for all wafers coming off the track, a process engineer can redirect wafers or lots with overlay signatures outside the standard population to offline metrology for excursion validation. With this added flexibility, engineers will be given more opportunities to catch wafers that need to be reworked, resulting in improved yield. The quality of the derived corrections from measured overlay metrology feedback can be improved using the approximated overlay to trigger, which wafers should or shouldn't be, measured inline. As a development or integration engineer the approximated overlay can be used to gain insight into lots and wafers used for design of experiments (DOE) troubleshooting. In this paper we will present the results of a case study that follows the machine learning function approximation approach to data analysis, with production overlay measured on an inline metrology system at SK hynix.

  14. DOE Office of Scientific and Technical Information (OSTI.GOV)

    Plessow, Philipp N.; Bajdich, Michal; Greene, Joshua

    The formation of thin oxide films on metal supports is an important phenomenon, especially in the context of strong metal support interaction (SMSI). Computational predictions of the stability of these films are hampered by their structural complexity and a varying lattice mismatch with different supports. In this study, we report a large combination of supports and ultrathin oxide films studied with density functional theory (DFT). Trends in stability are investigated through a descriptor-based analysis. Since the studied films are bound to the support exclusively through metal–metal interaction, the adsorption energy of the oxide-constituting metal atom can be expected to bemore » a reasonable descriptor for the stability of the overlayers. If the same supercell is used for all supports, the overlayers experience different amounts of stress. Using supercells with small lattice mismatch for each system leads to significantly improved scaling relations for the stability of the overlayers. Finally, this approach works well for the studied systems and therefore allows the descriptor-based exploration of the thermodynamic stability of supported thin oxide layers.« less

  15. Does Gender Influence Colour Choice in the Treatment of Visual Stress?

    PubMed Central

    Conway, Miriam L.; Evans, Bruce J. W.; Evans, Josephine C.; Suttle, Catherine M.

    2016-01-01

    Purpose Visual Stress (VS) is a condition in which words appear blurred, in motion, or otherwise distorted when reading. Some people diagnosed with VS find that viewing black text on white paper through coloured overlays or precision tinted lenses (PTLs) reduces symptoms attributed to VS. The aim of the present study is to determine whether the choice of colour of overlays or PTLs is influenced by a patient’s gender. Methods Records of all patients attending a VS assessment in two optometry practices between 2009 and 2014 were reviewed retrospectively. Patients who reported a significant and consistent reduction in symptoms with either overlay and or PTL were included in the analysis. Overlays and PTLs were categorized as stereotypical male, female or neutral colours based on gender preferences as described in the literature. Chi-square analysis was carried out to determine whether gender (across all ages or within age groups) was associated with overlay or PTL colour choice. Results 279 patients (133 males and 146 females, mean age 17 years) consistently showed a reduction in symptoms with an overlay and were included. Chi-square analysis revealed no significant association between the colour of overlay chosen and male or female gender (Chi-square 0.788, p = 0.674). 244 patients (120 males and 124 females, mean age 24.5 years) consistently showed a reduction in symptoms with PTLs and were included. Chi-square analysis revealed a significant association between stereotypical male/female/neutral colours of PTLs chosen and male/female gender (Chi-square 6.46, p = 0.040). More males preferred stereotypical male colour PTLs including blue and green while more females preferred stereotypical female colour PTLs including pink and purple. Conclusions For some VS patients, the choice of PTL colour is influenced not only by the alleviation of symptoms but also by other non-visual factors such as gender. PMID:27648842

  16. Does Gender Influence Colour Choice in the Treatment of Visual Stress?

    PubMed

    Conway, Miriam L; Evans, Bruce J W; Evans, Josephine C; Suttle, Catherine M

    2016-01-01

    Visual Stress (VS) is a condition in which words appear blurred, in motion, or otherwise distorted when reading. Some people diagnosed with VS find that viewing black text on white paper through coloured overlays or precision tinted lenses (PTLs) reduces symptoms attributed to VS. The aim of the present study is to determine whether the choice of colour of overlays or PTLs is influenced by a patient's gender. Records of all patients attending a VS assessment in two optometry practices between 2009 and 2014 were reviewed retrospectively. Patients who reported a significant and consistent reduction in symptoms with either overlay and or PTL were included in the analysis. Overlays and PTLs were categorized as stereotypical male, female or neutral colours based on gender preferences as described in the literature. Chi-square analysis was carried out to determine whether gender (across all ages or within age groups) was associated with overlay or PTL colour choice. 279 patients (133 males and 146 females, mean age 17 years) consistently showed a reduction in symptoms with an overlay and were included. Chi-square analysis revealed no significant association between the colour of overlay chosen and male or female gender (Chi-square 0.788, p = 0.674). 244 patients (120 males and 124 females, mean age 24.5 years) consistently showed a reduction in symptoms with PTLs and were included. Chi-square analysis revealed a significant association between stereotypical male/female/neutral colours of PTLs chosen and male/female gender (Chi-square 6.46, p = 0.040). More males preferred stereotypical male colour PTLs including blue and green while more females preferred stereotypical female colour PTLs including pink and purple. For some VS patients, the choice of PTL colour is influenced not only by the alleviation of symptoms but also by other non-visual factors such as gender.

  17. First-principles study of nitric oxide oxidation on Pt(111) versus Pt overlayer on 3d transition metals

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Arevalo, Ryan Lacdao; Escaño, Mary Clare Sison; Kasai, Hideaki, E-mail: kasai@dyn.ap.eng.osaka-u.ac.jp

    2015-03-15

    Catalytic oxidation of NO to NO{sub 2} is a significant research interest for improving the quality of air through exhaust gas purification systems. In this paper, the authors studied this reaction on pure Pt and Pt overlayer on 3d transition metals using kinetic Monte Carlo simulations coupled with density functional theory based first principles calculations. The authors found that on the Pt(111) surface, NO oxidation proceeds via the Eley–Rideal mechanism, with O{sub 2} dissociative adsorption as the rate-determining step. The oxidation path via the Langmuir–Hinshelwood mechanism is very slow and does not significantly contribute to the overall reaction. However, inmore » the Pt overlayer systems, the oxidation of NO on the surface is more thermodynamically and kinetically favorable compared to pure Pt. These findings are attributed to the weaker binding of O and NO on the Pt overlayer systems and the binding configuration of NO{sub 2} that promotes easier N-O bond formation. These results present insights for designing affordable and efficient catalysts for NO oxidation.« less

  18. Tailoring properties of lossy-mode resonance optical fiber sensors with atomic layer deposition technique

    NASA Astrophysics Data System (ADS)

    Kosiel, Kamil; Koba, Marcin; Masiewicz, Marcin; Śmietana, Mateusz

    2018-06-01

    The paper shows application of atomic layer deposition (ALD) technique as a tool for tailoring sensorial properties of lossy-mode-resonance (LMR)-based optical fiber sensors. Hafnium dioxide (HfO2), zirconium dioxide (ZrO2), and tantalum oxide (TaxOy), as high-refractive-index dielectrics that are particularly convenient for LMR-sensor fabrication, were deposited by low-temperature (100 °C) ALD ensuring safe conditions for thermally vulnerable fibers. Applicability of HfO2 and ZrO2 overlays, deposited with ALD-related atomic level thickness accuracy for fabrication of LMR-sensors with controlled sensorial properties was presented. Additionally, for the first time according to our best knowledge, the double-layer overlay composed of two different materials - silicon nitride (SixNy) and TaxOy - is presented for the LMR fiber sensors. The thin films of such overlay were deposited by two different techniques - PECVD (the SixNy) and ALD (the TaxOy). Such approach ensures fast overlay fabrication and at the same time facility for resonant wavelength tuning, yielding devices with satisfactory sensorial properties.

  19. Confined catalysis under two-dimensional materials

    PubMed Central

    Li, Haobo; Xiao, Jianping; Bao, Xinhe

    2017-01-01

    Confined microenvironments formed in heterogeneous catalysts have recently been recognized as equally important as catalytically active sites. Understanding the fundamentals of confined catalysis has become an important topic in heterogeneous catalysis. Well-defined 2D space between a catalyst surface and a 2D material overlayer provides an ideal microenvironment to explore the confined catalysis experimentally and theoretically. Using density functional theory calculations, we reveal that adsorption of atoms and molecules on a Pt(111) surface always has been weakened under monolayer graphene, which is attributed to the geometric constraint and confinement field in the 2D space between the graphene overlayer and the Pt(111) surface. A similar result has been found on Pt(110) and Pt(100) surfaces covered with graphene. The microenvironment created by coating a catalyst surface with 2D material overlayer can be used to modulate surface reactivity, which has been illustrated by optimizing oxygen reduction reaction activity on Pt(111) covered by various 2D materials. We demonstrate a concept of confined catalysis under 2D cover based on a weak van der Waals interaction between 2D material overlayers and underlying catalyst surfaces. PMID:28533413

  20. Effect of Welding Heat Input on Microstructure and Texture of Inconel 625 Weld Overlay Studied Using the Electron Backscatter Diffraction Method

    NASA Astrophysics Data System (ADS)

    Kim, Joon-Suk; Lee, Hae-Woo

    2016-12-01

    The grain size and the texture of three specimens prepared at different heat inputs were determined using optical microscopy and the electron backscatter diffraction method of scanning electron microscopy. Each specimen was equally divided into fusion line zone (FLZ), columnar dendrite zone (CDZ), and surface zone (SZ), according to the location of the weld. Fine dendrites were observed in the FLZ, coarse dendrites in the CDZ, and dendrites grew perpendicular to the FLZ and CDZ. As the heat input increased, the melted zone in the vicinity of the FLZ widened due to the higher Fe content. A lower image quality value was observed for the FLZ compared to the other zones. The results of grain size measurement in each zone showed that the grain size of the SZ became larger as the heat input increased. From the inverse pole figure (IPF) map in the normal direction (ND) and the rolling direction (RD), as the heat input increased, a specific orientation was formed. However, a dominant [001] direction was observed in the RD IPF map.

  1. Predicting the accuracy of ligand overlay methods with Random Forest models.

    PubMed

    Nandigam, Ravi K; Evans, David A; Erickson, Jon A; Kim, Sangtae; Sutherland, Jeffrey J

    2008-12-01

    The accuracy of binding mode prediction using standard molecular overlay methods (ROCS, FlexS, Phase, and FieldCompare) is studied. Previous work has shown that simple decision tree modeling can be used to improve accuracy by selection of the best overlay template. This concept is extended to the use of Random Forest (RF) modeling for template and algorithm selection. An extensive data set of 815 ligand-bound X-ray structures representing 5 gene families was used for generating ca. 70,000 overlays using four programs. RF models, trained using standard measures of ligand and protein similarity and Lipinski-related descriptors, are used for automatically selecting the reference ligand and overlay method maximizing the probability of reproducing the overlay deduced from X-ray structures (i.e., using rmsd < or = 2 A as the criteria for success). RF model scores are highly predictive of overlay accuracy, and their use in template and method selection produces correct overlays in 57% of cases for 349 overlay ligands not used for training RF models. The inclusion in the models of protein sequence similarity enables the use of templates bound to related protein structures, yielding useful results even for proteins having no available X-ray structures.

  2. Research notes : polymer concrete bridge deck overlays : Deschutes River Bridge (Biggs), Maupin Bridge (Maupin) : final report.

    DOT National Transportation Integrated Search

    1995-07-01

    This report documents the construction and performance of two thin polymer concrete (with polyester/styrene resins) bridge deck overlays. The overlays were constructed in Biggs and Maupin, Oregon in June 1993. Construction of the overlays was less th...

  3. Use of Hydrogen Chemisorption and Ethylene Hydrogenation as Predictors for Aqueous Phase Reforming of Lactose over Ni@Pt and Co@Pt Bimetallic Overlayer Catalysts

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Lai, Qinghua; Skoglund, Michael D.; Zhang, Chen

    Overlayer Pt on Ni (Ni@Pt) or Co (Co@Pt) were synthesized and tested for H2 generation from APR of lactose. H2 chemisorption descriptor showed that Ni@Pt and Co@Pt overlayer catalysts had reduced H2 adsorption strength compared to a Pt only catalyst, which agree with computational predictions. The overlayer catalysts also demonstrated lower activity for ethylene hydrogenation than the Pt only catalyst, which likely resulted from decreased H2 binding strength decreasing the surface coverage of H2. XAS results showed that overlayer catalysts exhibited higher white line intensity than the Pt catalyst, which indicates a negative d-band shift for the Pt overlayer, furthermore » providing evidence for overlayer formation. Lactose APR studies showed that lactose can be used as feedstock to produce H2 and CO under desirable reaction conditions. The Pt active sites of Ni@Pt and Co@Pt overlayer catalysts showed significantly enhanced H2 production selectivity and activity when compared with that of a Pt only catalyst. The single deposition overlayer with the largest d-band shift showed the highest H2 activity. The results suggest that overlayer formation using directed deposition technique could modify the behavior of the surface metal and ultimately modify the APR activity.« less

  4. ArF step-and-scan system with 0.75 NA for the 0.10μm node

    NASA Astrophysics Data System (ADS)

    Vleeming, Bert; Heskamp, Barbra; Bakker, Hans; Verstappen, Leon; Finders, Jo; Stoeten, Jan; Boerret, Rainer; Roempp, Oliver

    2001-09-01

    It is widely expected that 193 nm lithography will be the technology of choice for volume production of the 0.10 micrometer device generation. For this purpose the PAS5500/1100TM Step & Scan system, the second generation ArF tool, was developed. It is based on the PAS5500/900TM, the body of which has been adapted to fit the new 0.75 NA StarlithTM projection optics. This high NA enables mass manufacturing of devices following the 0.10 micrometer design rule. The system features a 10 W 2 kHz ArF laser and the AERIALTM II illuminator that can be equipped with a QUASARTM (multipole) option. In order to minimize wafer processing influences on overlay performance ATHENATM off- axis alignment with phase modulator is implemented. The usage of Reticle Blue Alignment will further improve overlay as well as increase the system stability. In this paper the PAS5500/1100TM system layout is discussed and the first imaging and overlay results are presented. Imaging performance is illustrated by SEM pictures of 0.10 micrometer dense lines, 0.15, 0.13 and 0.12 micrometer dense contact holes, 0.10 micrometer DRAM isolation patterns, image plane deviation and system distortion fingerprints. Alignment reproducibility and single machine overlay results demonstrate the overlay capability.

  5. Computer vision and soft computing for automatic skull-face overlay in craniofacial superimposition.

    PubMed

    Campomanes-Álvarez, B Rosario; Ibáñez, O; Navarro, F; Alemán, I; Botella, M; Damas, S; Cordón, O

    2014-12-01

    Craniofacial superimposition can provide evidence to support that some human skeletal remains belong or not to a missing person. It involves the process of overlaying a skull with a number of ante mortem images of an individual and the analysis of their morphological correspondence. Within the craniofacial superimposition process, the skull-face overlay stage just focuses on achieving the best possible overlay of the skull and a single ante mortem image of the suspect. Although craniofacial superimposition has been in use for over a century, skull-face overlay is still applied by means of a trial-and-error approach without an automatic method. Practitioners finish the process once they consider that a good enough overlay has been attained. Hence, skull-face overlay is a very challenging, subjective, error prone, and time consuming part of the whole process. Though the numerical assessment of the method quality has not been achieved yet, computer vision and soft computing arise as powerful tools to automate it, dramatically reducing the time taken by the expert and obtaining an unbiased overlay result. In this manuscript, we justify and analyze the use of these techniques to properly model the skull-face overlay problem. We also present the automatic technical procedure we have developed using these computational methods and show the four overlays obtained in two craniofacial superimposition cases. This automatic procedure can be thus considered as a tool to aid forensic anthropologists to develop the skull-face overlay, automating and avoiding subjectivity of the most tedious task within craniofacial superimposition. Copyright © 2014 Elsevier Ireland Ltd. All rights reserved.

  6. Polymer concrete overlay on Beulah Road Bridge : interim report no. 1--installation and initial condition of overlay.

    DOT National Transportation Integrated Search

    1982-01-01

    The installation of a thin polymer concrete overlay on the Beulah Road bridge demonstrates that an overlay of low permeability and high skid resistance can be successfully installed by maintenance forces with a minimum of disruption to traffic, appro...

  7. Precise X-ray and video overlay for augmented reality fluoroscopy.

    PubMed

    Chen, Xin; Wang, Lejing; Fallavollita, Pascal; Navab, Nassir

    2013-01-01

    The camera-augmented mobile C-arm (CamC) augments any mobile C-arm by a video camera and mirror construction and provides a co-registration of X-ray with video images. The accurate overlay between these images is crucial to high-quality surgical outcomes. In this work, we propose a practical solution that improves the overlay accuracy for any C-arm orientation by: (i) improving the existing CamC calibration, (ii) removing distortion effects, and (iii) accounting for the mechanical sagging of the C-arm gantry due to gravity. A planar phantom is constructed and placed at different distances to the image intensifier in order to obtain the optimal homography that co-registers X-ray and video with a minimum error. To alleviate distortion, both X-ray calibration based on equidistant grid model and Zhang's camera calibration method are implemented for distortion correction. Lastly, the virtual detector plane (VDP) method is adapted and integrated to reduce errors due to the mechanical sagging of the C-arm gantry. The overlay errors are 0.38±0.06 mm when not correcting for distortion, 0.27±0.06 mm when applying Zhang's camera calibration, and 0.27±0.05 mm when applying X-ray calibration. Lastly, when taking into account all angular and orbital rotations of the C-arm, as well as correcting for distortion, the overlay errors are 0.53±0.24 mm using VDP and 1.67±1.25 mm excluding VDP. The augmented reality fluoroscope achieves an accurate video and X-ray overlay when applying the optimal homography calculated from distortion correction using X-ray calibration together with the VDP.

  8. Etude de L'interface Or/silicium Par Analyse de Surface et Microscopie Electronique

    NASA Astrophysics Data System (ADS)

    Lamontagne, Boris

    In order to start with the cleanest c-Si surface achievable, two cleaning procedures have been used and compared: aqueous chemical cleaning with HF, and sputter cleaning followed by high temperature annealing; the former is found to be the most efficient of the two. We have observed the formation of Si-C bonds induced by energetic particles associated to sputtering and sputter deposition. One of the main objectives of this work was to compare the Au/Si interfaces obtained by e-beam evaporation and by sputter deposition; Ag/Si, Cu/Si and Al/Si interfaces have also been examined. X-ray photoelectron diffraction has allowed us to judge the quality of the substrate crystallinity under the metallic overlayer, a method which readily showed the amorphisation of the c-Si substrate induced by sputter deposition. Moreover, XPD has indicated the Au overlayer to be amorphous, while the Ag and Cu appear to grow heteroepitaxially on c-Si(100). A new XPS parameter has been developed to characterize the metal/Si interface state, in particular, broadening of the interface induced by the sputter deposition. For the case of evaporated layers, it indicates that Au/Si and Cu/Si interfaces are diffuse, while Ag/Si and Al/Si interfaces are abrupt. Atomic force microscopy has revealed that sputter deposition reduces the tendency to form metal islands, characteristic of some overlayer/substrate systems such as Ag/Si. Our experiments have illustrated the role of two "new" parameters which lead to better knowledge and control of the sputter deposition process, namely the ion masses and the sample position relative to that of the target position. In the scientific literature, the value of the critical thickness, d_{rm c} , for reaction between Au and Si is still a controversial issue, probably on account of calibration problems. By using newly observed XPS discontinuities, corresponding to the completion of the first and second Au monolayers, we have been able to resolve this problem, and thereby precisely evaluate the critical thickness, d_ {rm c} = 2 ML. We obtained various new information about the Au/Si interface using complementary methods (XPD, XPS, TEM, AFM, etc.) information from which we developed a new model of the Au/Si interface; this so called "cluster model" correlates the observed overlayer structural transition with the beginning of the reaction between Au and Si. It suggests that reconstruction of the overlayer at 2 ML thickness activates the reaction between Si and Au (Si-Si bonds disruption, followed by Si outdiffusion). This model seems to be the only one capable of explaining the difference in reactivity between Au/Si and Ag/Si interfaces. (Abstract shortened by UMI.).

  9. Advanced overlay: sampling and modeling for optimized run-to-run control

    NASA Astrophysics Data System (ADS)

    Subramany, Lokesh; Chung, WoongJae; Samudrala, Pavan; Gao, Haiyong; Aung, Nyan; Gomez, Juan Manuel; Gutjahr, Karsten; Park, DongSuk; Snow, Patrick; Garcia-Medina, Miguel; Yap, Lipkong; Demirer, Onur Nihat; Pierson, Bill; Robinson, John C.

    2016-03-01

    In recent years overlay (OVL) control schemes have become more complicated in order to meet the ever shrinking margins of advanced technology nodes. As a result, this brings up new challenges to be addressed for effective run-to- run OVL control. This work addresses two of these challenges by new advanced analysis techniques: (1) sampling optimization for run-to-run control and (2) bias-variance tradeoff in modeling. The first challenge in a high order OVL control strategy is to optimize the number of measurements and the locations on the wafer, so that the "sample plan" of measurements provides high quality information about the OVL signature on the wafer with acceptable metrology throughput. We solve this tradeoff between accuracy and throughput by using a smart sampling scheme which utilizes various design-based and data-based metrics to increase model accuracy and reduce model uncertainty while avoiding wafer to wafer and within wafer measurement noise caused by metrology, scanner or process. This sort of sampling scheme, combined with an advanced field by field extrapolated modeling algorithm helps to maximize model stability and minimize on product overlay (OPO). Second, the use of higher order overlay models means more degrees of freedom, which enables increased capability to correct for complicated overlay signatures, but also increases sensitivity to process or metrology induced noise. This is also known as the bias-variance trade-off. A high order model that minimizes the bias between the modeled and raw overlay signature on a single wafer will also have a higher variation from wafer to wafer or lot to lot, that is unless an advanced modeling approach is used. In this paper, we characterize the bias-variance trade off to find the optimal scheme. The sampling and modeling solutions proposed in this study are validated by advanced process control (APC) simulations to estimate run-to-run performance, lot-to-lot and wafer-to- wafer model term monitoring to estimate stability and ultimately high volume manufacturing tests to monitor OPO by densely measured OVL data.

  10. A structural study of the K adsorption site on a Si(001)2 × 1 surface: Dimer, caves or both

    NASA Astrophysics Data System (ADS)

    Asensio, M. C.; Michel, E. G.; Alvarez, J.; Ocal, C.; Miranda, R.; Ferrer, S.

    1989-04-01

    The atomic structure of the clean Si(100) and K covered surfaces has been investigated by Auger electron diffraction (AED) monitoring the intensities along polar scans. This technique is sensitive to the asymmetric-dimer nature of the 2 × 1 reconstruction of the Si(001) surface. Data taken at room temperature for submonolayer coverages are consistent with adsorption of K on the troughs (cave position) existing between two consecutive dimer chains along the [110] direction. At 110 K both dimer and cave sites are occupied. A mild annealing to 300 K produces an overlayer redistribution in favor of the "cave" site further indicating that this site is energetically favoured as found in some recent calculations.

  11. A basic guide to overlay design using nondestructive testing equipment data

    NASA Astrophysics Data System (ADS)

    Turner, Vernon R.

    1990-08-01

    The purpose of this paper is to provide a basic and concise guide to designing asphalt concrete (AC) overlays over existing AC pavements. The basis for these designs is deflection data obtained from nondestructive testing (NDT) equipment. This data is used in design procedures which produce required overlay thickness or an estimate of remaining pavement life. This guide enables one to design overlays or better monitor the designs being performed by others. This paper will discuss three types of NDT equipment, the Asphalt Institute Overlay Designs by Deflection Analysis and by the effective thickness method as well as a method of estimating remaining pavement life, correlations between NDT equipment and recent correlations in Washington State. Asphalt overlays provide one of the most cost effective methods of improving existing pavements. Asphalt overlays can be used to strengthen existing pavements, to reduce maintenance costs, to increase pavement life, to provide a smoother ride, and to improve skid resistance.

  12. Polymer concrete overlay on the Big Swan Creek Bridge : interim report no. 1--installation and initial condition of overlay.

    DOT National Transportation Integrated Search

    1984-01-01

    The installation of a thin polymer concrete overlay on the Big Swan Creek Bridge provides further evidence that an overlay of low permeability can be soundly bonded to a concrete bridge deck by maintenance forces with a minimum of disruption to traff...

  13. Seeing the LITE

    NASA Astrophysics Data System (ADS)

    Brecher, K.

    2000-12-01

    We are developing a number of eyes-on experiments, lecture demonstrations and Web based JAVA applets about light, optics, color and visual perception as part of `Project LITE - Light Inquiry Through Experiments'. These are intended for incorporation into introductory level university science courses in astronomy, physics and other disciplines. In this presentation, several of the new LITE demonstrations applicable to large astronomy and physics classes will be shown. One demonstration involves novel materials to display Rayleigh scattering (blue skies, red sunsets and interstellar reddening - NOT redshift!) - including polarization effects. Others employ incandescent bulbs, LED's and laser pointers to illustrate fluorescence, diffraction and other physical and quantum optics phenomena. Still other demonstrations utilize transparent plastic moire overlays as well as computer animated moire patterns to show a variety of astronomical and physical phenomena. We will also display some of our applets posted at the Project LITE Web site (http://www.bu.edu/smec/lite) as well as the associated kit of optical materials we have developed for use by individual students in their own homes or dormitory rooms. This work was supported in part by NSF grant # DUE-9950551.

  14. Optical DC overlay measurement in the 2nd level process of 65 nm alternating phase shift mask

    NASA Astrophysics Data System (ADS)

    Ma, Jian; Han, Ke; Lee, Kyung; Korobko, Yulia; Silva, Mary; Chavez, Joas; Irvine, Brian; Henrichs, Sven; Chakravorty, Kishore; Olshausen, Robert; Chandramouli, Mahesh; Mammen, Bobby; Padmanaban, Ramaswamy

    2005-11-01

    Alternating phase shift mask (APSM) techniques help bridge the significant gap between the lithography wavelength and the patterning of minimum features, specifically, the poly line of 35 nm gate length (1x) in Intel's 65 nm technology. One of key steps in making APSM mask is to pattern to within the design tolerances the 2nd level resist so that the zero-phase apertures will be protected by the resist and the pi-phase apertures will be wide open for quartz etch. The ability to align the 2nd level to the 1st level binary pattern, i.e. the 2nd level overlay capability is very important, so is the capability of measuring the overlay accurately. Poor overlay could cause so-called the encroachment after quartz etch, producing undesired quartz bumps in the pi-apertures or quartz pits in the zero-apertures. In this paper, a simple, low-cost optical setup for the 2nd level DC (develop check) overlay measurements in the high volume manufacturing (HVM) of APSM masks is presented. By removing systematic errors in overlay associated with TIS and MIS (tool-induced shift and Mask-process induced shift), it is shown that this setup is capable of supporting the measurement of DC overlay with a tolerance as small as +/- 25 nm. The outstanding issues, such as DC overlay error component analysis, DC - FC (final check) overlay correlation and the overlay linearity (periphery vs. indie), are discussed.

  15. Automatic Generation of Overlays and Offset Values Based on Visiting Vehicle Telemetry and RWS Visuals

    NASA Technical Reports Server (NTRS)

    Dunne, Matthew J.

    2011-01-01

    The development of computer software as a tool to generate visual displays has led to an overall expansion of automated computer generated images in the aerospace industry. These visual overlays are generated by combining raw data with pre-existing data on the object or objects being analyzed on the screen. The National Aeronautics and Space Administration (NASA) uses this computer software to generate on-screen overlays when a Visiting Vehicle (VV) is berthing with the International Space Station (ISS). In order for Mission Control Center personnel to be a contributing factor in the VV berthing process, computer software similar to that on the ISS must be readily available on the ground to be used for analysis. In addition, this software must perform engineering calculations and save data for further analysis.

  16. Evaluation of the construction and performance of multiple layer polymer concrete overlays : interim report no. 2, condition of the overlays after five years in service.

    DOT National Transportation Integrated Search

    1987-01-01

    This interim report presents the results after 5 years of a study undertaken to evaluate multiple layer polymer concrete overlays over a 10-year period. The report indicates that an overlay of low permeability and high skid resistance can be successf...

  17. Gossip-Based Broadcast

    NASA Astrophysics Data System (ADS)

    Leitão, João; Pereira, José; Rodrigues, Luís

    Gossip, or epidemic, protocols have emerged as a powerful strategy to implement highly scalable and resilient reliable broadcast primitives on large scale peer-to-peer networks. Epidemic protocols are scalable because they distribute the load among all nodes in the system and resilient because they have an intrinsic level of redundancy that masks node and network failures. This chapter provides an introduction to gossip-based broadcast on large-scale unstructured peer-to-peer overlay networks: it surveys the main results in the field, discusses techniques to build and maintain the overlays that support efficient dissemination strategies, and provides an in-depth discussion and experimental evaluation of two concrete protocols, named HyParView and Plumtree.

  18. How Langmuir-Blodgett trilayers act as templates for directed self-assembly of nanoparticles

    NASA Astrophysics Data System (ADS)

    Mukherjee, Smita; Datta, Alokmay; Biswas, Nupur; Giglia, Angelo; Nannarone, Stefano

    2014-04-01

    Atomic force microscopy (AFM) shows that Langmuir-Blodgett (LB) deposition of dissimilar metal stearates (MSt, M = Co, Zn, Cd) on templates of Co-stearate (Co-T) and Cd-stearate (Cd-T) results in self-assembly of MSts into nanocrystalline grains having clear and consistent morphological habits. The grains are better formed and well separated on Cd-T than on Co-T. Fourier transform infrared spectroscopy (FTIR) results show that the headgroup coordination of the overlayer is tuned by the coordination of the Cd-T template and remains unaffected by that of the Co-T template. They also indicate co-existence of a different kind of headgroup structure that is close to the undissociated fatty acid headgroup but differing more in the two types of carbon-oxygen bonds, suggesting an inter-headgroup bonding such as hydrogen bond that may exist on a nanocrystal surface. Results of synchrotron x-ray diffraction at C K-edge, of ZnSt on Cd-T (ZnSt/Cd-T) and Co-T (ZnSt/Co-T), point to a non-closed packed structure for ZnSt/Cd-T and a closed-packed structure for ZnSt/Co-T, with significant superlattice order in the former. The presence of crystalline phases of ZnSt in the nanometer scale, on LB templates, in contrast to the the presence of lamellar phase in bulk ZnSt, is attributed to the the presence of unidentate metal-carboxylate coordination in the former and absence of it in the latter, creating different gradients of dipolar forces at template overlayer interface. Relative strength of this long-range force over short-range intermolecular forces in the templates qualitatively explains better crystallinity and higher ordering in ZnSt/Cd-T compared to ZnSt/Co-T. We propose that the role of dipole moment gradient between template and overlayer in tuning of these metal-organic nanoparticles may be somewhat similar to structural and optical tunability of semiconductor nanocrystals by thermal and self-equilibrium strain.

  19. Highly coke-resistant ni nanoparticle catalysts with minimal sintering in dry reforming of methane.

    PubMed

    Han, Joung Woo; Kim, Chanyeon; Park, Jun Seong; Lee, Hyunjoo

    2014-02-01

    Nickel catalysts are typically used for hydrogen production by reforming reactions. Reforming methane with carbon dioxide, called dry reforming of methane (DRM), is a good way to produce hydrogen or syngas (a mixture of hydrogen and carbon monoxide) from two notable greenhouse gases. However, Ni catalysts used for DRM suffer from severe coke deposition. It has been known that small Ni nanoparticles are advantageous to reduce coke formation, but the high reaction temperature of DRM (800 °C) inevitably induces aggregation of the nanoparticles, leading to severe coke formation and degraded activity. Here, we develop highly coke-resistant Ni catalysts by immobilizing premade Ni nanoparticles of 5.2 nm in size onto functionalized silica supports, and then coating the Ni/SiO2 catalyst with silica overlayers. The silica overlayers enable the transfer of reactants and products while preventing aggregation of the Ni nanoparticles. The silica-coated Ni catalysts operate stably for 170 h without any degradation in activity. No carbon deposition was observed by temperature programmed oxidation (TPO), transmission electron microscopy (TEM), X-ray diffraction (XRD), and Raman spectroscopy. The Ni catalysts without silica coating show severe sintering after DRM reaction, and the formation of filamentous carbon was observed. The coke-resistant Ni catalyst is potentially useful in various hydrocarbon transformations. Copyright © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  20. Passivation of surface states of α-Fe2O3(0001) surface by deposition of Ga2O3 overlayers: A density functional theory study.

    PubMed

    Ulman, Kanchan; Nguyen, Manh-Thuong; Seriani, Nicola; Gebauer, Ralph

    2016-03-07

    There is a big debate in the community regarding the role of surface states of hematite in the photoelectrochemical water splitting. Experimental studies on non-catalytic overlayers passivating the hematite surface states claim a favorable reduction in the overpotential for the water splitting reaction. As a first step towards understanding the effect of these overlayers, we have studied the system Ga2O3 overlayers on hematite (0001) surfaces using first principles computations in the PBE+U framework. Our computations suggest that stoichiometric terminations of Ga2O3 overlayers are energetically more favored than the bare surface, at ambient oxygen chemical potentials. Energetics suggest that the overlayers prefer to grow via a layer-plus-island (Stranski-Krastanov) growth mode with a critical layer thickness of 1-2 layers. Thus, a complete wetting of the hematite surface by an overlayer of gallium oxide is thermodynamically favored. We establish that the effect of deposition of the Ga2O3 overlayers on the bare hematite surface is to passivate the surface states for the stoichiometric termination. For the oxygen terminated surface which is the most stable termination under photoelectrochemical conditions, the effect of deposition of the Ga2O3 overlayer is to passivate the hole-trapping surface state.

  1. Electronic structure of dense Pb overlayers on Si(111) investigated using angle-resolved photoemission

    NASA Astrophysics Data System (ADS)

    Choi, W. H.; Koh, H.; Rotenberg, E.; Yeom, H. W.

    2007-02-01

    Dense Pb overlayers on Si(111) are important as the wetting layer for anomalous Pb island growth as well as for their own complex “devil’s-staircase” phases. The electronic structures of dense Pb overlayers on Si(111) were investigated in detail by angle-resolved photoemission. Among the series of ordered phases found recently above one monolayer, the low-coverage 7×3 and the high-coverage 14×3 phases are studied; they are well ordered and form reproducibly in large areas. The band dispersions and Fermi surfaces of the two-dimensional (2D) electronic states of these overlayers are mapped out. A number of metallic surface-state bands are identified for both phases with complex Fermi contours. The basic features of the observed Fermi contours can be explained by overlapping 2D free-electron-like Fermi circles. This analysis reveals that the 2D electrons near the Fermi level of the 7×3 and 14×3 phases are mainly governed by strong 1×1 and 3×3 potentials, respectively. The origins of the 2D electronic states and their apparent Fermi surface shapes are discussed based on recent structure models.

  2. Investigation of Tensile Creep of a Normal Strength Overlay Concrete.

    PubMed

    Drexel, Martin; Theiner, Yvonne; Hofstetter, Günter

    2018-06-12

    The present contribution deals with the experimental investigation of the time-dependent behavior of a typical overlay concrete subjected to tensile stresses. The latter develop in concrete overlays, which are placed on existing concrete structures as a strengthening measure, due to the shrinkage of the young overlay concrete, which is restrained by the substrate concrete. Since the tensile stresses are reduced by creep, creep in tension is investigated on sealed and unsealed specimens, loaded at different concrete ages. The creep tests as well as the companion shrinkage tests are performed in a climatic chamber at constant temperature and constant relative humidity. Since shrinkage depends on the change of moisture content, the evolution of the mass water content is determined at the center of each specimen by means of an electrolytic resistivity-based system. Together with the experimental results for compressive creep from a previous study, a consistent set of time-dependent material data, determined for the same composition of the concrete mixture and on identical specimens, is now available. It consists of the hygral and mechanical properties, creep and shrinkage strains for both sealed and drying conditions, the respective compliance functions, and the mass water contents in sealed and unsealed, loaded and load-free specimens.

  3. Understanding overlay signatures using machine learning on non-lithography context information

    NASA Astrophysics Data System (ADS)

    Overcast, Marshall; Mellegaard, Corey; Daniel, David; Habets, Boris; Erley, Georg; Guhlemann, Steffen; Thrun, Xaver; Buhl, Stefan; Tottewitz, Steven

    2018-03-01

    Overlay errors between two layers can be caused by non-lithography processes. While these errors can be compensated by the run-to-run system, such process and tool signatures are not always stable. In order to monitor the impact of non-lithography context on overlay at regular intervals, a systematic approach is needed. Using various machine learning techniques, significant context parameters that relate to deviating overlay signatures are automatically identified. Once the most influential context parameters are found, a run-to-run simulation is performed to see how much improvement can be obtained. The resulting analysis shows good potential for reducing the influence of hidden context parameters on overlay performance. Non-lithographic contexts are significant contributors, and their automatic detection and classification will enable the overlay roadmap, given the corresponding control capabilities.

  4. High temperature glass thermal control structure and coating. [for application to spacecraft reusable heat shielding

    NASA Technical Reports Server (NTRS)

    Stewart, D. A.; Goldstein, H. E.; Leiser, D. B. (Inventor)

    1983-01-01

    A high temperature stable and solar radiation stable thermal control coating is described which is useful either as such, applied directly to a member to be protected, or applied as a coating on a re-usable surface insulation (RSI). It has a base coat layer and an overlay glass layer. The base coat layer has a high emittance, and the overlay layer is formed from discrete, but sintered together glass particles to give the overlay layer a high scattering coefficient. The resulting two-layer space and thermal control coating has an absorptivity-to-emissivity ratio of less than or equal to 0.4 at room temperature, with an emittance of 0.8 at 1200 F. It is capable of exposure to either solar radiation or temperatures as high as 2000 F without significant degradation. When used as a coating on a silica substrate to give an RSI structure, the coatings of this invention show significantly less reduction in emittance after long term convective heating and less residual strain than prior art coatings for RSI structures.

  5. Trends in the thermodynamic stability of ultrathin supported oxide films

    DOE PAGES

    Plessow, Philipp N.; Bajdich, Michal; Greene, Joshua; ...

    2016-05-05

    The formation of thin oxide films on metal supports is an important phenomenon, especially in the context of strong metal support interaction (SMSI). Computational predictions of the stability of these films are hampered by their structural complexity and a varying lattice mismatch with different supports. In this study, we report a large combination of supports and ultrathin oxide films studied with density functional theory (DFT). Trends in stability are investigated through a descriptor-based analysis. Since the studied films are bound to the support exclusively through metal–metal interaction, the adsorption energy of the oxide-constituting metal atom can be expected to bemore » a reasonable descriptor for the stability of the overlayers. If the same supercell is used for all supports, the overlayers experience different amounts of stress. Using supercells with small lattice mismatch for each system leads to significantly improved scaling relations for the stability of the overlayers. Finally, this approach works well for the studied systems and therefore allows the descriptor-based exploration of the thermodynamic stability of supported thin oxide layers.« less

  6. Ridge preservation comparing socket allograft alone to socket allograft plus facial overlay xenograft: a clinical and histologic study in humans.

    PubMed

    Poulias, Evmenios; Greenwell, Henry; Hill, Margaret; Morton, Dean; Vidal, Ricardo; Shumway, Brian; Peterson, Thomas L

    2013-11-01

    Previous studies of ridge preservation showed a loss of ≈18% or 1.5 mm of crestal ridge width in spite of treatment. The primary aim of this randomized, controlled, masked clinical trial is to compare a socket graft to the same treatment plus a buccal overlay graft, both with a polylactide membrane, to determine if loss of ridge width can be prevented by use of an overlay graft. Twelve patients who served as positive controls received an intrasocket mineralized cancellous allograft (socket group), and 12 patients received the same socket graft procedure plus buccal overlay cancellous xenograft (overlay group). Horizontal ridge dimensions were measured with a digital caliper, and vertical ridge changes were measured from a stent. Before implant placement, at 4 months, a trephine core was obtained for histologic analysis. The mean horizontal ridge width at the crest for the socket group decreased from 8.7 ± 1.0 to 7.1 ± 1.5 mm for a mean loss of 1.6 ± 0.8 mm (P <0.05), whereas the same measurement for the overlay group decreased from 8.4 ± 1.4 to 8.1 ± 1.4 mm for a mean loss of 0.3 ± 0.9 mm (P >0.05). The overlay group was significantly different from the socket group (P <0.05). Histologic analysis revealed that the socket group had 35% ± 16% vital bone, and the overlay group had 40% ± 16% (P >0.05). The overlay treatment significantly prevented loss of ridge width and preserved or augmented the buccal contour. The socket and overlay groups healed with a high percentage of vital bone.

  7. Augmented reality building operations tool

    DOEpatents

    Brackney, Larry J.

    2014-09-09

    A method (700) for providing an augmented reality operations tool to a mobile client (642) positioned in a building (604). The method (700) includes, with a server (660), receiving (720) from the client (642) an augmented reality request for building system equipment (612) managed by an energy management system (EMS) (620). The method (700) includes transmitting (740) a data request for the equipment (612) to the EMS (620) and receiving (750) building management data (634) for the equipment (612). The method (700) includes generating (760) an overlay (656) with an object created based on the building management data (634), which may be sensor data, diagnostic procedures, or the like. The overlay (656) is configured for concurrent display on a display screen (652) of the client (642) with a real-time image of the building equipment (612). The method (700) includes transmitting (770) the overlay (656) to the client (642).

  8. Mechanistic flexible pavement overlay design program : tech summary.

    DOT National Transportation Integrated Search

    2009-07-01

    The Louisiana Department of Transportation and Development (LADOTD) currently follows the 1993 : AASHTO pavement design guides component analysis method in its fl exible pavement overlay thickness : design. Such an overlay design method, how...

  9. Synthesis study of nondestructive testing devices for use in overlay thickness design of flexible pavements

    NASA Astrophysics Data System (ADS)

    Smith, R. E.; Lytton, R. L.

    1984-04-01

    A ready reference for highway engineers who are interested in purchasing nondestructive testing (NDT) equipment for use in designing overlays for flexible pavements was prepared. All commercially available equipment is described. Information includes basic descriptions plus current prices quoted by the manufacturers/distributors. To determine user comments, a questionnaire was sent to nine State agencies, and one Federal agency. The responses to these questionnaires are summarized. Overlay thickness design procedures for flexible pavements are reviewed. Important components related to the use of NDT deflection measuremnts in overlay design are identified and addressed. Summary tables of equipment characteristics and overlay design procedures are presented.

  10. Type A polymer concrete overlay field trials : final report.

    DOT National Transportation Integrated Search

    1984-12-01

    This report describes placement and subsequent performance of two methyl methacrylate polymer concrete overlays. Performance is evaluated as to: 1) the mixing and placement characteristics of the methyl methacrylate polymer concretes as overlay mater...

  11. Fabrication of magnetic bubble memory overlay

    NASA Technical Reports Server (NTRS)

    1973-01-01

    Self-contained magnetic bubble memory overlay is fabricated by process that employs epitaxial deposition to form multi-layered complex of magnetically active components on single chip. Overlay fabrication comprises three metal deposition steps followed by subtractive etch.

  12. Improved performance of JPCP overlays.

    DOT National Transportation Integrated Search

    2013-07-01

    The overall performance of Michigan concrete overlays has been good. However, some recent JPCP overlay projects have developed premature distress with signs of pumping. It is suspected that lack of drainage was the main cause for the distresses rangi...

  13. Verification of the ODOT overlay design procedure : final report, June 1996.

    DOT National Transportation Integrated Search

    1996-06-01

    The current ODOT overlay design procedure sometimes indicates additional pavement thickness is needed right after the overlay construction. Evaluation of the current procedure reveals that using spreadabiity to back calculate existing pavement modulu...

  14. Tack coat optimization for HMA overlays laboratory testing.

    DOT National Transportation Integrated Search

    2008-09-01

    Interface bonding between hot-mix asphalt (HMA) overlays and Portland cement concrete (PCC) pavements can be one of the most : significant factors affecting overlay service life. Various factors may affect the bonding condition at the interface, incl...

  15. Very-Early-Strength Latex-Modified Concrete Overlays

    DOT National Transportation Integrated Search

    1998-12-01

    This report describes the installation and condition of the first two very-early-strength latex-modified concrete (LMC-VE) overlays to be constructed for the Virginia Department of Transportation. The overlays were prepared with a special blended cem...

  16. Very-early-strength latex-modified concrete overlay.

    DOT National Transportation Integrated Search

    1998-12-01

    This paper describes the installation and condition of the first two very-early-strength latex modified concrete (LMC-VE) overlays constructed for the Virginia Department of Transportation. The overlays were prepared with a special blended cement rat...

  17. Repair, Evaluation, Maintenance, and Rehabilitation Research Program Overlays on Horizontal Concrete Surfaces: Case Histories

    DTIC Science & Technology

    1994-02-01

    ash, silica-fume, polymer -modified, polymer , and fiber - reinforced concretes. For some nonstructural repairs, unbonded overlays have been employed in an...which silica fume was included; polymer -modified concrete overlay, one in which a polymer admixture had been included; and fiber - reinforced concrete...of pumps. However, a determination has not been made for the source of leakage. 56 Chapter 6 Polymer -Modified Concrete Overlays 7 Fiber - Reinforced

  18. Influence of curing time, overlay material and thickness on three light-curing composites used for luting indirect composite restorations.

    PubMed

    D'Arcangelo, Camillo; De Angelis, Francesco; Vadini, Mirco; Carluccio, Fabio; Vitalone, Laura Merla; D'Amario, Maurizio

    2012-08-01

    To assess the microhardness of three resin composites employed in the adhesive luting of indirect composite restorations and examine the influence of the overlay material and thickness as well as the curing time on polymerization rate. Three commercially available resin composites were selected: Enamel Plus HRI (Micerium) (ENA), Saremco ELS (Saremco Dental) (SAR), Esthet-X HD (Dentsply/DeTrey) (EST-X). Post-polymerized cylinders of 6 different thicknesses were produced and used as overlays: 2 mm, 3 mm, 3.5 mm, 4 mm, 5 mm, and 6 mm. Two-mm-thick disks were produced and employed as underlays. A standardized amount of composite paste was placed between the underlay and the overlay surfaces which were maintained at a fixed distance of 0.5 mm. Light curing of the luting composite layer was performed through the overlays for 40, 80, or 120 s. For each specimen, the composite to be cured, the cured overlay, and the underlay were made out of the same batch of resin composite. All specimens were assigned to three experimental groups on the basis of the resin composite used, and to subgroups on the basis of the overlay thickness and the curing time, resulting in 54 experimental subgroups (n = 5). Forty-five additional specimens, 15 for each material under investigation, were produced and subjected to 40, 80, or 120 s of light curing using a microscope glass as an overlay; they were assigned to 9 control subgroups (n = 5). Three Vicker's hardness (VH) indentations were performed on each specimen. Means and standard deviations were calculated. Data were statistically analyzed using 3-way ANOVA. Within the same material, VH values lower than 55% of control were not considered acceptable. The used material, the overlay thickness, and the curing time significantly influenced VH values. In the ENA group, acceptable hardness values were achieved with 3.5-mm or thinner overlays after 120 or 80 s curing time (VH 41.75 and 39.32, respectively), and with 2-mm overlays after 40 s (VH 54.13). In the SAR group, acceptable hardness values were only achieved with 2-mm-thick overlays after 120 or 80 s curing time (VH 39.81 and 29.78, respectively). In the EST-X group, acceptable hardness values were only achieved with 3-mm or thinner overlays, after 120 or 80 s curing time (VH 36.20 and 36.03, respectively). Curing time, restoration thickness, and overlay material significantly influenced the microhardness of the tested resin composites employed as luting agents. The clinician should carefully keep these factors under control.

  19. The Assessment of Distortion in Neurosurgical Image Overlay Projection.

    PubMed

    Vakharia, Nilesh N; Paraskevopoulos, Dimitris; Lang, Jozsef; Vakharia, Vejay N

    2016-02-01

    Numerous studies have demonstrated the superiority of neuronavigation during neurosurgical procedures compared to non-neuronavigation-based procedures. Limitations to neuronavigation systems include the need for the surgeons to avert their gaze from the surgical field and the cost of the systems, especially for hospitals in developing countries. Overlay projection of imaging directly onto the patient allows localization of intracranial structures. A previous study using overlay projection demonstrated the accuracy of image coregistration for a lesion in the temporal region but did not assess image distortion when projecting onto other anatomical locations. Our aim is to quantify this distortion and establish which regions of the skull would be most suitable for overlay projection. Using the difference in size of a square grid when projected onto an anatomically accurate model skull and a flat surface, from the same distance, we were able to calculate the degree of image distortion when projecting onto the skull from the anterior, posterior, superior, and lateral aspects. Measuring the size of a square when projected onto a flat surface from different distances allowed us to model change in lesion size when projecting a deep structure onto the skull surface. Using 2 mm as the upper limit for distortion, our results show that images can be accurately projected onto the majority (81.4%) of the surface of the skull. Our results support the use of image overlay projection in regions with ≤2 mm distortion to assist with localization of intracranial lesions at a fraction of the cost of existing methods. © The Author(s) 2015.

  20. Holistic metrology qualification extension and its application to characterize overlay targets with asymmetric effects

    NASA Astrophysics Data System (ADS)

    Dos Santos Ferreira, Olavio; Sadat Gousheh, Reza; Visser, Bart; Lie, Kenrick; Teuwen, Rachel; Izikson, Pavel; Grzela, Grzegorz; Mokaberi, Babak; Zhou, Steve; Smith, Justin; Husain, Danish; Mandoy, Ram S.; Olvera, Raul

    2018-03-01

    Ever increasing need for tighter on-product overlay (OPO), as well as enhanced accuracy in overlay metrology and methodology, is driving semiconductor industry's technologists to innovate new approaches to OPO measurements. In case of High Volume Manufacturing (HVM) fabs, it is often critical to strive for both accuracy and robustness. Robustness, in particular, can be challenging in metrology since overlay targets can be impacted by proximity of other structures next to the overlay target (asymmetric effects), as well as symmetric stack changes such as photoresist height variations. Both symmetric and asymmetric contributors have impact on robustness. Furthermore, tweaking or optimizing wafer processing parameters for maximum yield may have an adverse effect on physical target integrity. As a result, measuring and monitoring physical changes or process abnormalities/artefacts in terms of new Key Performance Indicators (KPIs) is crucial for the end goal of minimizing true in-die overlay of the integrated circuits (ICs). IC manufacturing fabs often relied on CD-SEM in the past to capture true in-die overlay. Due to destructive and intrusive nature of CD-SEMs on certain materials, it's desirable to characterize asymmetry effects for overlay targets via inline KPIs utilizing YieldStar (YS) metrology tools. These KPIs can also be integrated as part of (μDBO) target evaluation and selection for final recipe flow. In this publication, the Holistic Metrology Qualification (HMQ) flow was extended to account for process induced (asymmetric) effects such as Grating Imbalance (GI) and Bottom Grating Asymmetry (BGA). Local GI typically contributes to the intrafield OPO whereas BGA typically impacts the interfield OPO, predominantly at the wafer edge. Stack height variations highly impact overlay metrology accuracy, in particular in case of multi-layer LithoEtch Litho-Etch (LELE) overlay control scheme. Introducing a GI impact on overlay (in nm) KPI check quantifies the grating imbalance impact on overlay, whereas optimizing for accuracy using self-reference captures the bottom grating asymmetry effect. Measuring BGA after each process step before exposure of the top grating helps to identify which specific step introduces the asymmetry in the bottom grating. By evaluating this set of KPI's to a BEOL LELE overlay scheme, we can enhance robustness of recipe selection and target selection. Furthermore, these KPIs can be utilized to highlight process and equipment abnormalities. In this work, we also quantified OPO results with a self-contained methodology called Triangle Method. This method can be utilized for LELE layers with a common target and reference. This allows validating general μDBO accuracy, hence reducing the need for CD-SEM verification.

  1. Visualizations of Travel Time Performance Based on Vehicle Reidentification Data

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Young, Stanley Ernest; Sharifi, Elham; Day, Christopher M.

    This paper provides a visual reference of the breadth of arterial performance phenomena based on travel time measures obtained from reidentification technology that has proliferated in the past 5 years. These graphical performance measures are revealed through overlay charts and statistical distribution as revealed through cumulative frequency diagrams (CFDs). With overlays of vehicle travel times from multiple days, dominant traffic patterns over a 24-h period are reinforced and reveal the traffic behavior induced primarily by the operation of traffic control at signalized intersections. A cumulative distribution function in the statistical literature provides a method for comparing traffic patterns from variousmore » time frames or locations in a compact visual format that provides intuitive feedback on arterial performance. The CFD may be accumulated hourly, by peak periods, or by time periods specific to signal timing plans that are in effect. Combined, overlay charts and CFDs provide visual tools with which to assess the quality and consistency of traffic movement for various periods throughout the day efficiently, without sacrificing detail, which is a typical byproduct of numeric-based performance measures. These methods are particularly effective for comparing before-and-after median travel times, as well as changes in interquartile range, to assess travel time reliability.« less

  2. Ultrasound-ultrasound image overlay fusion improves real-time control of radiofrequency ablation margin in the treatment of hepatocellular carcinoma.

    PubMed

    Minami, Yasunori; Minami, Tomohiro; Hagiwara, Satoru; Ida, Hiroshi; Ueshima, Kazuomi; Nishida, Naoshi; Murakami, Takamichi; Kudo, Masatoshi

    2018-05-01

    To assess the clinical feasibility of US-US image overlay fusion with evaluation of the ablative margin in radiofrequency ablation (RFA) for hepatocellular carcinoma (HCC). Fifty-three patients with 68 HCCs measuring 0.9-4.0 cm who underwent RFA guided by US-US overlay image fusion were included in this retrospective study. By an overlay of pre-/postoperative US, the tumor image could be projected onto the ablative hyperechoic zone. Therefore, the ablative margin three-dimensionally could be shown during the RFA procedure. US-US image overlay was compared to dynamic CT a few days after RFA for assessment of early treatment response. Accuracy of graded response was calculated, and the performance of US-US image overlay fusion was compared with that of CT using a Kappa agreement test. Technically effective ablation was achieved in a single session, and 59 HCCs (86.8 %) succeeded in obtaining a 5-mm margin on CT. The response with US-US image overlay correctly predicted early CT evaluation with an accuracy of 92.6 % (63/68) (k = 0.67; 95 % CI: 0.39-0.95). US-US image overlay fusion can be proposed as a feasible guidance in RFA with a safety margin and predicts early response of treatment assessment with high accuracy. • US-US image overlay fusion visualizes the ablative margin during RFA procedure. • Visualizing the margin during the procedure can prompt immediate complementary treatment. • US image fusion correlates with the results of early evaluation CT.

  3. Augmenting reality in Direct View Optical (DVO) overlay applications

    NASA Astrophysics Data System (ADS)

    Hogan, Tim; Edwards, Tim

    2014-06-01

    The integration of overlay displays into rifle scopes can transform precision Direct View Optical (DVO) sights into intelligent interactive fire-control systems. Overlay displays can provide ballistic solutions within the sight for dramatically improved targeting, can fuse sensor video to extend targeting into nighttime or dirty battlefield conditions, and can overlay complex situational awareness information over the real-world scene. High brightness overlay solutions for dismounted soldier applications have previously been hindered by excessive power consumption, weight and bulk making them unsuitable for man-portable, battery powered applications. This paper describes the advancements and capabilities of a high brightness, ultra-low power text and graphics overlay display module developed specifically for integration into DVO weapon sight applications. Central to the overlay display module was the development of a new general purpose low power graphics controller and dual-path display driver electronics. The graphics controller interface is a simple 2-wire RS-232 serial interface compatible with existing weapon systems such as the IBEAM ballistic computer and the RULR and STORM laser rangefinders (LRF). The module features include multiple graphics layers, user configurable fonts and icons, and parameterized vector rendering, making it suitable for general purpose DVO overlay applications. The module is configured for graphics-only operation for daytime use and overlays graphics with video for nighttime applications. The miniature footprint and ultra-low power consumption of the module enables a new generation of intelligent DVO systems and has been implemented for resolutions from VGA to SXGA, in monochrome and color, and in graphics applications with and without sensor video.

  4. Asphaltic concrete overlays of rigid and flexible pavements : final report.

    DOT National Transportation Integrated Search

    1980-10-01

    This study evaluated the effect of a given thickness of asphaltic concrete overlay in rehabilitating 53 test sections conforming to the experiment design. This factorial design specified various levels of traffic intensity and overlay thickness for b...

  5. Cracking and debonding of a thin fiber reinforced concrete overlay.

    DOT National Transportation Integrated Search

    2017-04-01

    Previous field studies suggested that macro-fibers incorporated in thin overlay pavements will result in reduced crack opening widths, vertical deflections, and debonding rates compared to that of unreinforced overlays. A simple finite element (FE) m...

  6. High early strength latex modified concrete overlay.

    DOT National Transportation Integrated Search

    1988-01-01

    This report describes the condition of the first high early strength latex modified concrete (LMC-HE) overlay to be constructed for the Virginia Department of Transportation. The overlay was prepared with type III cement and with more cement and less...

  7. The polarization of Sb overlayers on NiMnSb(100)

    NASA Astrophysics Data System (ADS)

    Komesu, Takashi; Borca, C. N.; Jeong, Hae-Kyung; Dowben, P. A.; Ristoiu, Delia; Nozières, J. P.; Stadler, Shane; Idzerda, Y. U.

    2000-08-01

    We have investigated the induced polarization of paramagnetic Sb overlayers on the Heusler alloy NiMnSb. From combined X-ray absorption spectroscopy (XAS) and spin-polarized inverse photoemission spectroscopy (SPIPES), we can assign some of the unoccupied states of the Heusler alloy NiMnSb. With increasing thickness of the Sb overlayer, there is a decline in the density of states near the Fermi energy, as expected for a semimetal overlayer on a metallic substrate. While the Sb is polarized by the ferromagnetic NiMnSb substrate, consistent with the expectations of mean field theory, the polarization at the center of the surface/overlayer Brillouin zone cannot be easily related to the induced magnetization.

  8. Effect of a Dielectric Overlay on a Linearly Tapered Slot Antenna Excited by a Coplanar Waveguide

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.; Lee, Richard Q.; Perl, Thomas D.; Silvestro, John

    1993-01-01

    The effect of a dielectric overlay on a linearly tapered slot antenna (LTSA) is studied. The LTSA under study has very wide bandwidth and excellent radiation patterns. A dielectric overlay improves the patterns and directivity of the antenna by increasing the electrical length and effective aperture of the antenna. A dielectric overlay can also be used to reduce the physical length of the antenna without compromising the pattern quality.

  9. Pressure relieving support surfaces (PRESSURE) trial: cost effectiveness analysis.

    PubMed

    Iglesias, Cynthia; Nixon, Jane; Cranny, Gillian; Nelson, E Andrea; Hawkins, Kim; Phillips, Angela; Torgerson, David; Mason, Su; Cullum, Nicky

    2006-06-17

    To assess the cost effectiveness of alternating pressure mattresses compared with alternating pressure overlays for the prevention of pressure ulcers in patients admitted to hospital. Cost effectiveness analysis carried out alongside the pressure relieving support surfaces (PRESSURE) trial; a multicentre UK based pragmatic randomised controlled trial. 11 hospitals in six UK NHS trusts. Intention to treat population comprising 1971 participants. Kaplan Meier estimates of restricted mean time to development of pressure ulcers and total costs for treatment in hospital. Alternating pressure mattresses were associated with lower overall costs (283.6 pounds sterling per patient on average, 95% confidence interval--377.59 pounds sterling to 976.79 pounds sterling) mainly due to reduced length of stay in hospital, and greater benefits (a delay in time to ulceration of 10.64 days on average,--24.40 to 3.09). The differences in health benefits and total costs for hospital stay between alternating pressure mattresses and alternating pressure overlays were not statistically significant; however, a cost effectiveness acceptability curve indicated that on average alternating pressure mattresses compared with alternating pressure overlays were associated with an 80% probability of being cost saving. Alternating pressure mattresses for the prevention of pressure ulcers are more likely to be cost effective and are more acceptable to patients than alternating pressure overlays.

  10. Factors affecting maintenance overlay ride quality : 1996 rideability status.

    DOT National Transportation Integrated Search

    1997-01-01

    In early 1996, the Virginia Transportation Research Council initiated a formal analysis of the factors affecting overlay ride quality. As part of that effort, a statewide, multi-year survey of the ride quality for both new overlays and pavement await...

  11. Asphaltic concrete overlays of rigid and flexible pavements : interim report No. 1.

    DOT National Transportation Integrated Search

    1977-09-01

    This study evaluated the effect of a given thickness of asphaltic concrete overlay in rehabilitating 53 test sections conforming to the experiment design. This factorial design specified various levels of traffic intensity and overlay thickness for b...

  12. Tack coat optimization for HMA overlays : accelerated pavement test report.

    DOT National Transportation Integrated Search

    2009-02-01

    Interface bonding between hot-mix asphalt (HMA) overlays and Portland cement concrete (PCC) pavements is one : of the most significant factors affecting overlay service life. This study was performed to quantify the effects of HMA type, : tack coat t...

  13. Mechanistic-empirical asphalt overlay thickness design and analysis system.

    DOT National Transportation Integrated Search

    2009-10-01

    The placement of an asphalt overlay is the most common method used by the Texas Department of Transportation (TxDOT) to rehabilitate : existing asphalt and concrete pavements. The type of overlay and its required thickness are important decisions tha...

  14. Latex-modified fiber-reinforced concrete bridge deck overlay : construction/interim report.

    DOT National Transportation Integrated Search

    1993-06-01

    Latex-modified concrete (LMC) is Portland cement concrete (PCC) with an admixture of latex. LMC is considered to be nearly impermeable to chlorides and is extensively used to construct bridge deck overlays. Unfortunately, some of these overlays have ...

  15. Microsilica modified concrete for bridge deck overlays : second-year interim report.

    DOT National Transportation Integrated Search

    1994-10-01

    This report summarizes the performance of microsilica concrete (MC) overlays on seven distressed portland cement concrete bridge decks at three sites in Oregon. This report emphasizes the overlays' condition after two, or in some cases, three years o...

  16. Overcoming Sequence Misalignments with Weighted Structural Superposition

    PubMed Central

    Khazanov, Nickolay A.; Damm-Ganamet, Kelly L.; Quang, Daniel X.; Carlson, Heather A.

    2012-01-01

    An appropriate structural superposition identifies similarities and differences between homologous proteins that are not evident from sequence alignments alone. We have coupled our Gaussian-weighted RMSD (wRMSD) tool with a sequence aligner and seed extension (SE) algorithm to create a robust technique for overlaying structures and aligning sequences of homologous proteins (HwRMSD). HwRMSD overcomes errors in the initial sequence alignment that would normally propagate into a standard RMSD overlay. SE can generate a corrected sequence alignment from the improved structural superposition obtained by wRMSD. HwRMSD’s robust performance and its superiority over standard RMSD are demonstrated over a range of homologous proteins. Its better overlay results in corrected sequence alignments with good agreement to HOMSTRAD. Finally, HwRMSD is compared to established structural alignment methods: FATCAT, SSM, CE, and Dalilite. Most methods are comparable at placing residue pairs within 2 Å, but HwRMSD places many more residue pairs within 1 Å, providing a clear advantage. Such high accuracy is essential in drug design, where small distances can have a large impact on computational predictions. This level of accuracy is also needed to correct sequence alignments in an automated fashion, especially for omics-scale analysis. HwRMSD can align homologs with low sequence identity and large conformational differences, cases where both sequence-based and structural-based methods may fail. The HwRMSD pipeline overcomes the dependency of structural overlays on initial sequence pairing and removes the need to determine the best sequence-alignment method, substitution matrix, and gap parameters for each unique pair of homologs. PMID:22733542

  17. Development of an improved overlay procedure for Oregon : volume III, field manual.

    DOT National Transportation Integrated Search

    1987-12-01

    This report is the third in a three-volume series dealing with the development of an improved overlay design procedure for Oregon. This report presents technical guidelines for using the proposed overlay design procedure. Four areas are described, in...

  18. Polymer concrete bridge deck overlays : Deschutes River Bridge (Biggs) and Maupin Bridge (Maupin) : final report.

    DOT National Transportation Integrated Search

    1995-07-01

    This report documents the construction and performance of two thin polymer concrete (with polyester/styrene resins) bridge deck overlays. The overlays were constructed in Biggs and Maupin, Oregon in June 1993. : Several problems were encountered duri...

  19. Microsilica modified concrete for bridge deck overlays : construction report.

    DOT National Transportation Integrated Search

    1990-10-01

    The study objective was to see if microsilica concrete (MC) is a viable alternative to the latex modified concrete (LMC) usually used on bridge deck overlays in Oregon. The study addresses MC overlays placed in 1989 on Portland cement concrete (PCC) ...

  20. Interpretation, compilation and field verification procedures in the CARETS project

    USGS Publications Warehouse

    Alexander, Robert H.; De Forth, Peter W.; Fitzpatrick, Katherine A.; Lins, Harry F.; McGinty, Herbert K.

    1975-01-01

    The production of the CARETS map data base involved the development of a series of procedures for interpreting, compiling, and verifying data obtained from remote sensor sources. Level II land use mapping from high-altitude aircraft photography at a scale of 1:100,000 required production of a photomosaic mapping base for each of the 48, 50 x 50 km sheets, and the interpretation and coding of land use polygons on drafting film overlays. CARETS researchers also produced a series of 1970 to 1972 land use change overlays, using the 1970 land use maps and 1972 high-altitude aircraft photography. To enhance the value of the land use sheets, researchers compiled series of overlays showing cultural features, county boundaries and census tracts, surface geology, and drainage basins. In producing Level I land use maps from Landsat imagery, at a scale of 1:250,000, interpreters overlaid drafting film directly on Landsat color composite transparencies and interpreted on the film. They found that such interpretation involves pattern and spectral signature recognition. In studies using Landsat imagery, interpreters identified numerous areas of change but also identified extensive areas of "false change," where Landsat spectral signatures but not land use had changed.

  1. Structural Studies of the Initial Stages of Fluoride Epitaxy on Silicon and GERMANIUM(111)

    NASA Astrophysics Data System (ADS)

    Denlinger, Jonathan David

    The epitaxial growth of ionic insulators on semiconductor substrates is of interest due to fundamental issues of interface bonding and structure as well as to potential technological applications. The initial stages of Group IIa fluoride insulator growth on (111) Si and Ge substrates by molecular beam epitaxy are studied with the in situ combination of X-ray Photoelectron Spectroscopy (XPS) and Diffraction (XPD). While XPS probes the electronic structure, XPD reveals atomic structure. In addition, low energy electron diffraction (LEED) is used to probe surface order and a separate study using X-ray standing wave (XSW) fluorescence reveals interface cation bonding sites. Following the formation of a chemically-reacted interface layer in CaF_2 epitaxy on Si(111), the morphology of the subsequent bulk layers is found to be dependent on substrate temperature and incident flux rate. At temperatures >=600 ^circC a transition from three -dimensional island formation at low flux to laminar growth at higher flux is observed with bulk- and interface-resolved XPD. At lower substrate temperatures, laminar growth is observed at all fluxes, but with different bulk nucleation behavior due to changes in the stoichiometry of the interface layer. This new observation of kinetic effects on the initial nucleation in CaF_2 epitaxy has important ramifications for the formation of thicker heterostructures for scientific or device applications. XPS and XPD are also used to identify for the first time, surface core-level species of Ca and F, and a secondary interface-shifted F Auger component arising from a second-layer site directly above interface-layer Ca atoms. The effects of lattice mismatch (from -3% to 8%) are investigated with various growths of Ca_{rm x}Sr _{rm 1-x}F_2 on Si and Ge (111) substrates. Triangulation of (111) and (220) XSW indicates a predominance of 3-fold hollow Sr bonding sites coexisting with 4-fold top sites for monolayers of SrF_2 on Si. XSW and LEED reveal a lateral discommensuration of the overlayer for lattice mismatches of >5% relative to the substrate. XPD also reveals a transition from single - to mixed-domains of overlayer crystallographic orientation for mismatches >=3.5%.

  2. Molecular beam studies of the growth and kinetics of self-assembled monolayers

    NASA Astrophysics Data System (ADS)

    Schwartz, Peter Vincent

    Low energy helium diffraction, a quantitative structural characterization tool, has been used to measure the growth kinetics of self-assembled monolayers (SAMs). Special attention was given to the growth of decanethiol monolayers deposited from a molecular beam onto the (111) face of gold single crystals especially at the initial stages of growth. The influence of changing impingement rate, substrate temperature, and annealing treatments was investigated. We also studied the structure and dynamics of physisorbed adlayers on top of the monolayers and structural variations in monolayers caused by changes in chemical composition such as the addition of phenyl groups, and hydroxyl groups. Experimental work involved renovations to the existing diffractometer. The apparatus was improved with respect to its signal to noise ratio; efficiency in sample preparation and data collection; and the reproducibility of obtaining clean crystal surfaces. The renovations greatly extended the range of experiments of which the diffraction machine is capable. The growth of n-decanethiol SAMs by gas deposition was identified as a multi-stage process where the initial "lying down" layer grows on the bare gold surface with a near unity sticking coefficient, while the subsequent, "standing-up" phase grows with a sticking coefficient of about 10sp{-3}. The ordering and chemisorption of a single "lying down" layer of decanethiol was investigated by annealing a single layer physisorbed on a 130 K Au(111) surface to incrementally higher temperatures. The molecules first align themselves with the underlying gold substrate, then orient themselves in the "head to head" two molecule unit mesh, then chemisorb at still higher temperatures. Overlayers of long chain molecules grown on top of monolayers on Au(111) are found to be more ordered than the underlying monolayers themselves. The energy of adsorption to the organic surface is found to be very close to that of the bulk value, even for a gold-adlayer separation distance of about 4 A. Debye-Waller experiments were done to measure the stiffness of monolayers of different chain lengths, coverages and functional groups as well as overlayers.

  3. Application of overlay modeling and control with Zernike polynomials in an HVM environment

    NASA Astrophysics Data System (ADS)

    Ju, JaeWuk; Kim, MinGyu; Lee, JuHan; Nabeth, Jeremy; Jeon, Sanghuck; Heo, Hoyoung; Robinson, John C.; Pierson, Bill

    2016-03-01

    Shrinking technology nodes and smaller process margins require improved photolithography overlay control. Generally, overlay measurement results are modeled with Cartesian polynomial functions for both intra-field and inter-field models and the model coefficients are sent to an advanced process control (APC) system operating in an XY Cartesian basis. Dampened overlay corrections, typically via exponentially or linearly weighted moving average in time, are then retrieved from the APC system to apply on the scanner in XY Cartesian form for subsequent lot exposure. The goal of the above method is to process lots with corrections that target the least possible overlay misregistration in steady state as well as in change point situations. In this study, we model overlay errors on product using Zernike polynomials with same fitting capability as the process of reference (POR) to represent the wafer-level terms, and use the standard Cartesian polynomials to represent the field-level terms. APC calculations for wafer-level correction are performed in Zernike basis while field-level calculations use standard XY Cartesian basis. Finally, weighted wafer-level correction terms are converted to XY Cartesian space in order to be applied on the scanner, along with field-level corrections, for future wafer exposures. Since Zernike polynomials have the property of being orthogonal in the unit disk we are able to reduce the amount of collinearity between terms and improve overlay stability. Our real time Zernike modeling and feedback evaluation was performed on a 20-lot dataset in a high volume manufacturing (HVM) environment. The measured on-product results were compared to POR and showed a 7% reduction in overlay variation including a 22% terms variation. This led to an on-product raw overlay Mean + 3Sigma X&Y improvement of 5% and resulted in 0.1% yield improvement.

  4. The overlay tester : a sensitivity study to improve repeatability and minimize variability in the test results.

    DOT National Transportation Integrated Search

    2012-02-01

    Hot mix asphalt (HMA) overlay is one of the most commonly used methods for rehabilitating deteriorated pavements. One major type of distress influencing the life of an overlay is reflective cracking. Many departments of transportation have implemente...

  5. Latex modified Portland cement overlays : an analysis of samples removed from a bridge deck.

    DOT National Transportation Integrated Search

    1975-01-01

    This report describes an evaluation of the latex modified mortar overlay the Route 85 (NBL) bridge over the Roanoke River. While the performance of the overlay has been generally satisfactory, corings and chloride analyses indicate the possibility of...

  6. Effects of concrete moisture on polymer overlay bond over new concrete.

    DOT National Transportation Integrated Search

    2015-06-01

    Epoxy polymer overlays have been used for decades on existing bridge decks to protect the deck and extend its : service life. The polymer overlays ability to seal a bridge deck is now being specified for new construction. Questions exist : about t...

  7. Microsilica modified concrete for bridge deck overlays : first-year interim report.

    DOT National Transportation Integrated Search

    1991-11-01

    The study objective was to see if microsilica concrete (MC) is a viable alternative to the latex modified concrete (LMC) usually used on bridge deck overlays in Oregon. The study addresses MC overlays placed in 1989 on 7 portland cement concrete (PCC...

  8. Effectiveness of polymer bridge deck overlays in highway noise reduction : technical paper.

    DOT National Transportation Integrated Search

    2016-04-01

    The Kansas Department of Transportation (KDOT) began placing multi-layer polymer bridge deck overlays in 1999 and at the present time have over 200 in service. A few years after placing the overlays, individuals indicated that they noticed how quiet ...

  9. Performance evaluation of bridges with structural bridge deck overlays (SBDO).

    DOT National Transportation Integrated Search

    2006-03-01

    Structural Bridge Deck Overlay (SBDO) involves applying 6 to 10 inches (150 to 200 mm) of normal weight, class AA, reinforced concrete directly to a bridges original slab. The overlay is designed to increase the deck elevation to an extent that st...

  10. Evaluation of hydraulic cement concrete overlays placed on three pavements in Virginia.

    DOT National Transportation Integrated Search

    2000-08-01

    Three hydraulic cement concrete pavement overlays were placed in the summer of 1995 at three locations in Virginia. Two of the overlays were placed on continuously reinforced concrete pavement to prevent spalling caused by a shy cover over the reinfo...

  11. Phase investigation in Pt supported off-stoichiometric iron-platinum thin films

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Gupta, Rekha; Medwal, Rohit; Annapoorni, S., E-mail: annapoornis@yahoo.co.in

    2013-10-15

    Graphical abstract: - Highlights: • Low temperature FePt L1{sub 0} phase transformation using Pt/Fe{sub 3}Pt/Pt structure. • Temperature dependent FCC to FCT phase investigation using Rietveld refinement. • Estimation of soft and hard ferromagnetic contribution from demagnetization curve. • Interlayer diffusion and stoichiometry conformation of L1{sub 0} phase using RBS. • Correlation of structural, magnetic and RBS studies were successfully understood. - Abstract: The structural and magnetic phase transformation of Pt/Fe{sub 3}Pt/Pt films on Si <1 0 0> substrates prepared by DC magnetron sputtering is investigated as a function of annealing temperature. Pt diffusion driven low temperature phase transformation frommore » A1 to L1{sub 0} phase is achieved at 300 °C, attaining a very high coercivity of 9 kOe. At 300 °C, 85% L1{sub 0} phase transformation is observed using the X-ray diffraction profile fitting. The estimated phase content is also further verified by fitting the demagnetization curve. The underlayer promotes the ordering at lower temperature while overlayer induces growth along (0 0 1) preferred orientation. Rutherford back scattering study reveals interlayer diffusion and confirms the desired stoichiometry for L1{sub 0} phase. The presence of Pt under-overlayer provides the Pt source and further facilitates the Pt diffusion, which makes it effective in promoting the phase ordering at a lower temperature.« less

  12. Facile fabrication of ultrathin Pt overlayers onto nanoporous metal membranes via repeated Cu UPD and in situ redox replacement reaction.

    PubMed

    Liu, Pengpeng; Ge, Xingbo; Wang, Rongyue; Ma, Houyi; Ding, Yi

    2009-01-06

    Ultrathin Pt films from one to several atomic layers are successfully decorated onto nanoporous gold (NPG) membranes by utilizing under potential deposition (UPD) of Cu onto Au or Pt surfaces, followed by in situ redox replacement reaction (RRR) of UPD Cu by Pt. The thickness of Pt layers can be controlled precisely by repeating the Cu-UPD-RRR cycles. TEM observations coupled with electrochemical testing suggest that the morphology of Pt overlayers changes from an ultrathin epitaxial film in the case of one or two atomic layers to well-dispersed nanoislands in the case of four and more atomic layers. Electron diffraction (ED) patterns confirm that the as-prepared NPG-Pt membranes maintain a single-crystalline structure, even though the thickness of Pt films reaches six atomic layers, indicating the decorated Pt films hold the same crystallographic relationship to the NPG substrate during the entire fabrication process. Due to the regular modulation of Pt utilization, the electrocatalytic activity of NPG-Pt exhibits interesting surface structure dependence in methanol, ethanol, and CO electrooxidation reactions. These novel bimetallic nanocatalysts show excellent electrocatalytic activity and much enhanced poison tolerance as compared to the commercial Pt/C catalysts. The success in the fabrication of NPG-Pt-type materials provides a new path to prepare electrocatalysts with ultralow Pt loading and high Pt utilization, which is of great significance in energy-related applications, such as direct alcohol fuel cells (DAFCs).

  13. Effects of concrete moisture on polymer overlay bond over new concrete : [technical summary].

    DOT National Transportation Integrated Search

    2015-06-01

    Epoxy polymer overlays have been used for decades on existing bridge decks to protect : the deck and extend its service life. The polymer overlays ability to seal a bridge deck : is now being specified for new construction. Questions exist about t...

  14. Latex modified asphalt and experimental joint treatments on asphaltic concrete overlays : experimental project No. 3 : asphalt additives.

    DOT National Transportation Integrated Search

    1988-06-01

    This report documents the construction and initial evaluation of several experimental features which were incorporated as part of an overlay of an existing PCC pavement in order to determine the feasibility of extending overlay service life. The expe...

  15. The use of fiber reinforcement in latex modified concrete overlay : final report.

    DOT National Transportation Integrated Search

    2016-12-01

    The requirement to quickly reopen highways in North Carolina has motivated the increased use of rapid-setting concrete in overlays. The addition of polymer latex to the material has been used to increase the service life of the overlays. The latex mo...

  16. Three year evaluation of I-40 crack and seat experimental project

    DOT National Transportation Integrated Search

    1989-10-01

    In 1986, Project I-40-3(31) was rehabilitated using crack and seat techniques and overlaying with a 4-inch HMAC overlay. The crack and seat technique was utilized to prevent reflection cracking in the HMAC overlay caused by joints in the existing JPC...

  17. A field investigation of concrete overlays containing latex, silica fume, or Pyrament cement.

    DOT National Transportation Integrated Search

    1996-01-01

    This study evaluated latex-modified concretes (LMC) and concretes containing silica fume (SFC) or Pyrament-blended cement (PBCC) in bridge deck overlays in the field. The condition of the overlays was monitored for 4 years. LMC and SFC were placed in...

  18. Performance of thin bonded epoxy overlays on asphalt and concrete bridge deck surfaces.

    DOT National Transportation Integrated Search

    2014-06-01

    This study is the evaluation of two thin bonded epoxy overlays: SafeLane (marketed by Cargill), and Flexogrid : (developed by PolyCarb). SafeLane is advertised as an anti-skid/anti-icing overlay that stores deicing chemicals for : release during wint...

  19. Variation of the conductance enhancement at BaSnO3/LaInxGa1-xO3 polar Interface

    NASA Astrophysics Data System (ADS)

    Kim, Young Mo; Shin, Juyeon; Kim, Youjung; Char, Kookrin

    We have recently reported that La-doped BaSnO3 (BLSO) displayed conductance enhancement by more than 104 times when LaInO3 (LIO) layer was grown on top of the BLSO layer. The conductance enhancement implies the two-dimensional electron gas (2DEG) formation at the interface. To identify the origin of the conductance enhancement, we developed other heterostructures based on different overlayers. Since LaGaO3 is also a polar perovskite like the LIO with its band gap of 4.4 eV and its lattice constant of 3.9, we investigated the variation of the conductance enhancement at LaIn1-xGaxO3 (LIGO)/BLSO interface while varying the Ga ratio. We first checked the interfacial epitaxial growth of LIGO on BSO by x-ray diffraction measurement and transmission electron microscopy. The sheet conductances of BLSO layer before and after the deposition of LIGO layer were measured. Putting together the structural and electrical properties of the LIGO/BLSO interfaces with various Ga compositions, we will discuss the origin of the conductance enhancement in terms of the strain-induced polarization in the LIGO layer. Samsung Science and Technology Foundation.

  20. Historical data learning based dynamic LSP routing for overlay IP/MPLS over WDM networks

    NASA Astrophysics Data System (ADS)

    Yu, Xiaojun; Xiao, Gaoxi; Cheng, Tee Hiang

    2013-08-01

    Overlay IP/MPLS over WDM network is a promising network architecture starting to gain wide deployments recently. A desirable feature of such a network is to achieve efficient routing with limited information exchanges between the IP/MPLS and the WDM layers. This paper studies dynamic label switched path (LSP) routing in the overlay IP/MPLS over WDM networks. To enhance network performance while maintaining its simplicity, we propose to learn from the historical data of lightpath setup costs maintained by the IP-layer integrated service provider (ISP) when making routing decisions. Using a novel historical data learning scheme for logical link cost estimation, we develop a new dynamic LSP routing method named Existing Link First (ELF) algorithm. Simulation results show that the proposed algorithm significantly outperforms the existing ones under different traffic loads, with either limited or unlimited numbers of optical ports. Effects of the number of candidate routes, add/drop ratio and the amount of historical data are also evaluated.

  1. Thermal fatigue and oxidation data for alloy/braze combinations

    NASA Technical Reports Server (NTRS)

    Hill, V. L.; Humphreys, V. E.

    1977-01-01

    Thermal fatigue and oxidation data were obtained for 62 brazed specimens of 3 iron-, 3 nickel-, and 1 cobalt-base alloy. Fluidized bed thermal cycling was conducted over the range 740/25 C employing 10 cm long single-edge wedge specimens. Immersion time was always 4 minutes in each bed. Types of test specimens employed in the program include those with brazed overlays on the specimen radius, those butt brazed at midspan and those with a brazed foil overlay on the specimen radius. Of the 18 braze overlay specimens, 5 generated fatigue cracks by 7000 cycles. Thermal cracking of butt brazed specimens occurred exclusively through the butt braze. Of the 23 butt brazed specimens, 7 survived 11,000 thermal cycles without cracking. Only 2 of the 21 foil overlaid specimens exhibiting cracking in 7,000 cycles. Blistering of the foil did occur for 2 alloys by 500 cycles. Oxidation of the alloy/braze combination was limited at the test maximum test temperature of 740 C.

  2. Design and construction of a bonded fiber concrete overlay of CRCP : final report.

    DOT National Transportation Integrated Search

    1992-01-01

    The purpose of this study was to evaluate a bonded steel fiber reinforced concrete overlay on an existing 8-inch CRC pavement on Interstate 10 south of Baton Rough, LA. The project objectives were to provide an overlay with a high probability for lon...

  3. Cost-effectiveness and performance of overlay systems in Illinois, volume 1 : effectiveness assessment of HMA overlay interlayer systems used to retard reflective cracking.

    DOT National Transportation Integrated Search

    2009-05-01

    This project evaluated the ability of interlayer systems used in HMA overlays to retard reflective cracking. Field : crack surveys and forensic investigation, including video imaging and ground penetrating radar surveys as well : as laboratory testin...

  4. Cost-effectiveness and performance of overlay systems in Illinois, volume 2 : guidelines for interlayer system selection decision when used in HMA overlays.

    DOT National Transportation Integrated Search

    2009-05-01

    In an effort to control reflective cracking in hot-mix asphalt (HMA) overlays placed over Portland Cement : Concrete (PCC) pavements, several reflective crack control (RCC) systems, including interlayer systems, : have been used. However, the cost-ef...

  5. Evaluation of the installation and initial condition of hydraulic cement concrete overlays placed on three pavements in Virginia.

    DOT National Transportation Integrated Search

    1999-04-01

    Hydraulic cement concrete pavement overlays were placed in the summer of 1995 at the following locations in Virginia: : 1-295 near Richmond : 1-85 near Petersburg : Rt. 29 near Charlottesville. : Overlays were placed on 1-295 SBL (near mi...

  6. Evaluation of the construction and performance of polymer concrete overlays on five bridges : interim report no. 1.

    DOT National Transportation Integrated Search

    1983-01-01

    The installation of thin polymer concrete overlays on five bridges on I-85 near Williamsburg, Virginia, has demonstrated that an overlay of low permeability and high skid resistance can be successfully installed by a contractor with a minimum of disr...

  7. Asphaltic concrete overlays of rigid and flexible pavements

    NASA Astrophysics Data System (ADS)

    Kinchen, R. W.; Temple, W. H.

    1980-10-01

    The development of a mechanistic approach to overlay thickness selection is described. The procedure utilizes a deflection analysis to determine pavement rehabilitation needs. Design guides for selecting the overlay thickness are presented. Tolerable deflection-traffic load relationships and the deflection attenuation properties of asphaltic concrete were developed, representing the subgrade support conditions and properties of materials used in Louisiana. All deflection measurements on asphaltic concrete were corrected for the effect of temperature. Deflection measurements taken before and after overlay were also adjusted to minimize the effects of seasonal subgrade moisture variation.

  8. Unique method for controlling device level overlay with high-NA optical overlay technique using YieldStar in a DRAM HVM environment

    NASA Astrophysics Data System (ADS)

    Park, Dong-Kiu; Kim, Hyun-Sok; Seo, Moo-Young; Ju, Jae-Wuk; Kim, Young-Sik; Shahrjerdy, Mir; van Leest, Arno; Soco, Aileen; Miceli, Giacomo; Massier, Jennifer; McNamara, Elliott; Hinnen, Paul; Böcker, Paul; Oh, Nang-Lyeom; Jung, Sang-Hoon; Chai, Yvon; Lee, Jun-Hyung

    2018-03-01

    This paper demonstrates the improvement using the YieldStar S-1250D small spot, high-NA, after-etch overlay in-device measurements in a DRAM HVM environment. It will be demonstrated that In-device metrology (IDM) captures after-etch device fingerprints more accurately compared to the industry-standard CDSEM. Also, IDM measurements (acquiring both CD and overlay) can be executed significantly faster increasing the wafer sampling density that is possible within a realistic metrology budget. The improvements to both speed and accuracy open the possibility of extended modeling and correction capabilities for control. The proof-book data of this paper shows a 36% improvement of device overlay after switching to control in a DRAM HVM environment using indevice metrology.

  9. Improved control of multi-layer overlay in advanced 8nm logic nodes

    NASA Astrophysics Data System (ADS)

    Kim, Tae-Sun; Park, Young-Sik; Kim, Yong-Chul; Kim, Byoung-Hoon; Lee, Ji-Hun; Kwak, Min-Keun; Choi, Sung-Won; Park, Joon-Soo; Yang, Hong-Cheon; Meixner, Philipp; Lee, Dong-jin; Kwon, Oh-Sung; Kim, Hyun-Su; Park, Jin-Tae; Lee, Sung-Min; Grouwstra, Cedric; van der Meijden, Vidar; El Kodadi, Mohamed; Kim, Chris; Guittet, Pierre-Yves; Nooitgedagt, Tjitte

    2018-03-01

    With the increase of litho-etch steps the industry requires metrology to deliver solutions to improve throughput of overlay measurements without impacting accuracy. ASML's YieldStar 350E is capable of utilizing targets, which can measure the overlay of multiple layers simultaneously. For the work discussed in this paper, an evaluation is performed on Logic product wafers using both single-layer and multi-layer (MLT) quad type targets (able to capture up to four litho-etch steps). Different target types were compared in terms of Move-and-Acquire (MA) time, residual and matching to SEM. Using the MLT targets, an MA time improvement of 56% was demonstrated on the singlelayer. The maximum delta between the overlay residual among the YieldStar targets after applying an high order model was shown to be 0.05 nm. In comparison to after-etch overlay, the correlation of the MLT target was determined with an R2 > 0.95 using a set-get wafer with induced 10 nm overlay range. On a normal production wafer, the correlation was R2 > 0.67, which is high on a wafer without induced overlay. The comparison of modeling parameters between SEM and MLT targets shows a good match (< 0.16nm) as well.

  10. Enabling optical metrology on small 5×5μm2 in-cell targets to support flexible sampling and higher order overlay and CD control for advanced logic devices nodes

    NASA Astrophysics Data System (ADS)

    Salerno, Antonio; de la Fuente, Isabel; Hsu, Zack; Tai, Alan; Chang, Hammer; McNamara, Elliott; Cramer, Hugo; Li, Daoping

    2018-03-01

    In next generation Logic devices, overlay control requirements shrink to sub 2.5nm level on-product overlay. Historically on-product overlay has been defined by the overlay capability of after-develop in-scribe targets. However, due to design and dimension, the after development metrology targets are not completely representative for the final overlay of the device. In addition, they are confined to the scribe-lane area, which limits the sampling possibilities. To address these two issues, metrology on structures matching the device structure and which can be sampled with high density across the device is required. Conventional after-etch CDSEM techniques on logic devices present difficulties in discerning the layers of interest, potential destructive charging effects and finally, they are limited by the long measurement times[1] [2] [3] . All together, limit the sampling densities and making CDSEM less attractive for control applications. Optical metrology can overcome most of these limitations. Such measurement, however, does require repetitive structures. This requirement is not fulfilled by logic devices, as the features vary in pitch and CD over the exposure field. The solution is to use small targets, with a maximum pad size of 5x5um2 , which can easily be placed in the logic cell area. These targets share the process and architecture of the device features of interest, but with a modified design that replicates as close as possible the device layout, allowing for in-device metrology for both CD and Overlay. This solution enables measuring closer to the actual product feature location and, not being limited to scribe-lanes, it opens the possibility of higher-density sampling schemes across the field. In summary, these targets become the facilitator of in-device metrology (IDM), that is, enabling the measurements both in-device Overlay and the CD parameters of interest and can deliver accurate, high-throughput, dense and after-etch measurements for Logic. Overlay improvements derived from a high-densely sampled Overlay map measured with 5x5 um2 In Device Metrology (IDM) targets were investigated on a customer Logic application. In this work we present both the main design aspects of the 5x5 um2 IDM targets, as well as the results on the improved Overlay performance.

  11. Morphological and structural studies of CBD-CdS thin films by microscopy and diffraction techniques

    NASA Astrophysics Data System (ADS)

    Martínez, M. A.; Guillén, C.; Herrero, J.

    1998-10-01

    The influence of cadmium salt and thiourea concentrations on the morphological and structural properties of chemical bath-deposited CdS thin films has been investigated. Two different feature regimes have been distinguished: an inner continuous layer grown directly on the glass and independent on the deposition conditions, and other porous overlayer, more dependent on the chemical concentrations. Root mean square, RMS, and average roughnesses, Ra, as quantified by AFM, are about 10-13 nm and 7-11 nm, respectively, for all CdS samples tested. These films are sulphur-poor, decreasing S/Cd atomic ratio from 0.82 at low cadmium salt, 1 mM, and high thiourea concentrations, 100 mM, down to 0.76 at higher [Cd 2+], 5 mM, and lower [TU], 10 mM.

  12. Patterning control strategies for minimum edge placement error in logic devices

    NASA Astrophysics Data System (ADS)

    Mulkens, Jan; Hanna, Michael; Slachter, Bram; Tel, Wim; Kubis, Michael; Maslow, Mark; Spence, Chris; Timoshkov, Vadim

    2017-03-01

    In this paper we discuss the edge placement error (EPE) for multi-patterning semiconductor manufacturing. In a multi-patterning scheme the creation of the final pattern is the result of a sequence of lithography and etching steps, and consequently the contour of the final pattern contains error sources of the different process steps. We describe the fidelity of the final pattern in terms of EPE, which is defined as the relative displacement of the edges of two features from their intended target position. We discuss our holistic patterning optimization approach to understand and minimize the EPE of the final pattern. As an experimental test vehicle we use the 7-nm logic device patterning process flow as developed by IMEC. This patterning process is based on Self-Aligned-Quadruple-Patterning (SAQP) using ArF lithography, combined with line cut exposures using EUV lithography. The computational metrology method to determine EPE is explained. It will be shown that ArF to EUV overlay, CDU from the individual process steps, and local CD and placement of the individual pattern features, are the important contributors. Based on the error budget, we developed an optimization strategy for each individual step and for the final pattern. Solutions include overlay and CD metrology based on angle resolved scatterometry, scanner actuator control to enable high order overlay corrections and computational lithography optimization to minimize imaging induced pattern placement errors of devices and metrology targets.

  13. Vision-based overlay of a virtual object into real scene for designing room interior

    NASA Astrophysics Data System (ADS)

    Harasaki, Shunsuke; Saito, Hideo

    2001-10-01

    In this paper, we introduce a geometric registration method for augmented reality (AR) and an application system, interior simulator, in which a virtual (CG) object can be overlaid into a real world space. Interior simulator is developed as an example of an AR application of the proposed method. Using interior simulator, users can visually simulate the location of virtual furniture and articles in the living room so that they can easily design the living room interior without placing real furniture and articles, by viewing from many different locations and orientations in real-time. In our system, two base images of a real world space are captured from two different views for defining a projective coordinate of object 3D space. Then each projective view of a virtual object in the base images are registered interactively. After such coordinate determination, an image sequence of a real world space is captured by hand-held camera with tracking non-metric measured feature points for overlaying a virtual object. Virtual objects can be overlaid onto the image sequence by taking each relationship between the images. With the proposed system, 3D position tracking device, such as magnetic trackers, are not required for the overlay of virtual objects. Experimental results demonstrate that 3D virtual furniture can be overlaid into an image sequence of the scene of a living room nearly at video rate (20 frames per second).

  14. The Molecular Volcano Revisited: Determination of Crack Propagation and Distribution During the Crystallization of Nanoscale Amorphous Solid Water Films.

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    May, Robert A.; Smith, R. Scott; Kay, Bruce D.

    2012-02-02

    Temperature programmed desorption (TPD) is utilized to determine the length distribution of cracks formed through amorphous solid water (ASW) during crystallization. This distribution is determined by monitoring how the thickness of an ASW overlayer alters desorption of an underlayer of O2. As deposited the ASW overlayer prevents desorption of O2. During crystallization, cracks form through the ASW overlayer and open a path to vacuum which allows O2 to escape in a rapid episodic release known as the 'molecular volcano'. Sufficiently thick ASW overlayers further trap O2 resulting in a second O2 desorption peak commensurate with desorption of the last ofmore » the ASW overlayer. The evolution of this trapping peak with overlayer thickness is the basis for determining the distribution of crystallization induced cracks through the ASW. Reflection adsorption infrared spectroscopy (RAIRS) and TPD of multicomponent parfait structures of ASW, O2 and Kr indicate that a preponderance of these cracks propagate down from the outer surface of the ASW.« less

  15. Overlay degradation induced by film stress

    NASA Astrophysics Data System (ADS)

    Huang, Chi-hao; Liu, Yu-Lin; Luo, Shing-Ann; Yang, Mars; Yang, Elvis; Hung, Yung-Tai; Luoh, Tuung; Yang, T. H.; Chen, K. C.

    2017-03-01

    The semiconductor industry has continually sought the approaches to produce memory devices with increased memory cells per memory die. One way to meet the increasing storage capacity demand and reduce bit cost of NAND flash memories is 3D stacked flash cell array. In constructing 3D NAND flash memories, increasing the number of stacked layers to build more memory cell number per unit area necessitates many high-aspect-ratio etching processes accordingly the incorporation of thick and unique etching hard-mask scheme has been indispensable. However, the ever increasingly thick requirement on etching hard-mask has made the hard-mask film stress control extremely important for maintaining good process qualities. The residual film stress alters the wafer shape consequently several process impacts have been readily observed across wafer, such as wafer chucking error on scanner, film peeling, materials coating and baking defects, critical dimension (CD) non-uniformity and overlay degradation. This work investigates the overlay and residual order performance indicator (ROPI) degradation coupling with increasingly thick advanced patterning film (APF) etching hard-mask. Various APF films deposited by plasma enhanced chemical vapor deposition (PECVD) method under different deposition temperatures, chemicals combinations, radio frequency powers and chamber pressures were carried out. And -342MPa to +80MPa film stress with different film thicknesses were generated for the overlay performance study. The results revealed the overlay degradation doesn't directly correlate with convex or concave wafer shapes but the magnitude of residual APF film stress, while increasing the APF thickness will worsen the overlay performance and ROPI strongly. High-stress APF film was also observed to enhance the scanner chucking difference and lead to more serious wafer to wafer overlay variation. To reduce the overlay degradation from ever increasingly thick APF etching hard-mask, optimizing the film stress of APF is the most effective way and high order overlay compensation is also helpful.

  16. Codes That Support Smart Growth Development

    EPA Pesticide Factsheets

    Provides examples of local zoning codes that support smart growth development, categorized by: unified development code, form-based code, transit-oriented development, design guidelines, street design standards, and zoning overlay.

  17. Prosthodontic management of worn dentition in pediatric patient with complete overlay dentures: a case report

    PubMed Central

    Rastogi, Jyoti; Jain, Chandni; Singh, Harkanwal Preet

    2012-01-01

    Overlay complete dentures are simple, reversible and economical treatment modality for patients with congenital or acquired disorders that severely affect the tooth development. It satisfies both the esthetic and functional demands where the extraction of teeth is not generally indicated. In pediatric patients, the overlay dentures establish a relatively stable occlusion that improves patient's tolerance to the future treatment procedures for worn dentition. This clinical report highlights the imperative need of appropriate treatment strategy and application of maxillary and mandibular overlay dentures in a pediatric patient who suffered from congenitally mutilated and worn dentition. PMID:23236577

  18. Visually assessed colour overlay features in shear-wave elastography for breast masses: quantification and diagnostic performance.

    PubMed

    Gweon, Hye Mi; Youk, Ji Hyun; Son, Eun Ju; Kim, Jeong-Ah

    2013-03-01

    To determine whether colour overlay features can be quantified by the standard deviation (SD) of the elasticity measured in shear-wave elastography (SWE) and to evaluate the diagnostic performance for breast masses. One hundred thirty-three breast lesions in 119 consecutive women who underwent SWE before US-guided core needle biopsy or surgical excision were analysed. SWE colour overlay features were assessed using two different colour overlay pattern classifications. Quantitative SD of the elasticity value was measured with the region of interest including the whole breast lesion. For the four-colour overlay pattern, the area under the ROC curve (Az) was 0.947; with a cutoff point between pattern 2 and 3, sensitivity and specificity were 94.4 % and 81.4 %. According to the homogeneity of the elasticity, the Az was 0.887; with a cutoff point between reasonably homogeneous and heterogeneous, sensitivity and specificity were 86.1 % and 82.5 %. For the SD of the elasticity, the Az was 0.944; with a cutoff point of 12.1, sensitivity and specificity were 88.9 % and 89.7 %. The colour overlay features showed significant correlations with the quantitative SD of the elasticity (P < 0.001). The colour overlay features and the SD of the elasticity in SWE showed excellent diagnostic performance and showed good correlations between them.

  19. Flexible pavement overlay design procedures. Volume 2: User manual

    NASA Astrophysics Data System (ADS)

    Majidzadeh, K.; Ilves, G. J.

    1981-08-01

    This user manual outlines a procedure for the design of asphaltic concrete overlays on existing asphaltic concrete pavement surfaces. It is intended as a guide to the user on the type and form of information required as input to the procedure and contains all elements necessary for the user to prepare designs for flexible pavement overlays.

  20. Questioning the Benefits That Coloured Overlays Can Have for Reading in Students with and without Dyslexia

    ERIC Educational Resources Information Center

    Henderson, Lisa M.; Tsogka, Natassa; Snowling, Margaret J.

    2013-01-01

    Visual stress (the experience of visual distortions and discomfort during prolonged reading) is frequently identified and alleviated with coloured overlays or lenses. Previous studies have associated visual stress with dyslexia and as a consequence, coloured overlays are widely distributed to children and adults with reading difficulty. However,…

  1. 49 CFR 236.1015 - PTC Safety Plan content requirements and PTC System Certification.

    Code of Federal Regulations, 2013 CFR

    2013-10-01

    ... Administrator finds that the PTCSP and supporting documentation support a finding that the system complies with... additional requirements apply to: (1) Non-vital overlay. A PTC system proposed as an overlay on the existing... greater than the level of safety for the previous PTC systems. (2) Vital overlay. A PTC system proposed on...

  2. 49 CFR 236.1015 - PTC Safety Plan content requirements and PTC System Certification.

    Code of Federal Regulations, 2012 CFR

    2012-10-01

    ... Administrator finds that the PTCSP and supporting documentation support a finding that the system complies with... additional requirements apply to: (1) Non-vital overlay. A PTC system proposed as an overlay on the existing... greater than the level of safety for the previous PTC systems. (2) Vital overlay. A PTC system proposed on...

  3. 49 CFR 236.1015 - PTC Safety Plan content requirements and PTC System Certification.

    Code of Federal Regulations, 2011 CFR

    2011-10-01

    ... Administrator finds that the PTCSP and supporting documentation support a finding that the system complies with... additional requirements apply to: (1) Non-vital overlay. A PTC system proposed as an overlay on the existing... greater than the level of safety for the previous PTC systems. (2) Vital overlay. A PTC system proposed on...

  4. Accelerated testing for studying pavement design and performance (FY 2000) : effectiveness of fiber reinforced and plain, ultra-thin concrete overlays on Portland Cement Concrete Pavement (PCCP).

    DOT National Transportation Integrated Search

    2003-11-01

    The objective of the research was to compare the performance of fiber reinforced and plain PCC concrete overlay when used as a thin non-dowelled overlay on top of a rubblized, distressed concrete pavement. The experiment was conducted at the Accelera...

  5. Persistent photoconductivity due to trapping of induced charges in Sn/ZnO thin film based UV photodetector

    NASA Astrophysics Data System (ADS)

    Yadav, Harish Kumar; Sreenivas, K.; Gupta, Vinay

    2010-05-01

    Photoconductivity relaxation in rf magnetron sputtered ZnO thin films integrated with ultrathin tin metal overlayer is investigated. Charge carriers induced at the ZnO-metal interface by the tin metal overlayer compensates the surface lying trap centers and leads to the enhanced photoresponse. On termination of ultraviolet radiation, recombination of the photoexcited electrons with the valence band holes leaves the excess carriers deeply trapped at the recombination center and holds the dark conductivity level at a higher value. Equilibrium between the recombination centers and valence band, due to trapped charges, eventually stimulates the persistent photoconductivity in the Sn/ZnO photodetectors.

  6. Using the overlay assay to qualitatively measure bacterial production of and sensitivity to pneumococcal bacteriocins.

    PubMed

    Maricic, Natalie; Dawid, Suzanne

    2014-09-30

    Streptococcus pneumoniae colonizes the highly diverse polymicrobial community of the nasopharynx where it must compete with resident organisms. We have shown that bacterially produced antimicrobial peptides (bacteriocins) dictate the outcome of these competitive interactions. All fully-sequenced pneumococcal strains harbor a bacteriocin-like peptide (blp) locus. The blp locus encodes for a range of diverse bacteriocins and all of the highly conserved components needed for their regulation, processing, and secretion. The diversity of the bacteriocins found in the bacteriocin immunity region (BIR) of the locus is a major contributor of pneumococcal competition. Along with the bacteriocins, immunity genes are found in the BIR and are needed to protect the producer cell from the effects of its own bacteriocin. The overlay assay is a quick method for examining a large number of strains for competitive interactions mediated by bacteriocins. The overlay assay also allows for the characterization of bacteriocin-specific immunity, and detection of secreted quorum sensing peptides. The assay is performed by pre-inoculating an agar plate with a strain to be tested for bacteriocin production followed by application of a soft agar overlay containing a strain to be tested for bacteriocin sensitivity. A zone of clearance surrounding the stab indicates that the overlay strain is sensitive to the bacteriocins produced by the pre-inoculated strain. If no zone of clearance is observed, either the overlay strain is immune to the bacteriocins being produced or the pre-inoculated strain does not produce bacteriocins. To determine if the blp locus is functional in a given strain, the overlay assay can be adapted to evaluate for peptide pheromone secretion by the pre-inoculated strain. In this case, a series of four lacZ-reporter strains with different pheromone specificity are used in the overlay.

  7. Evaluation of Tizian overlays by means of a swept source optical coherence tomography system

    NASA Astrophysics Data System (ADS)

    Marcauteanu, Corina; Sinescu, Cosmin; Negrutiu, Meda Lavinia; Stoica, Eniko Tunde; Topala, Florin; Duma, Virgil Florin; Bradu, Adrian; Podoleanu, Adrian Gh.

    2016-03-01

    The teeth affected by pathologic attrition can be restored by a minimally invasive approach, using Tizian overlays. In this study we prove the advantages of a fast swept source (SS) OCT system in the evaluation of Tizian overlays placed in an environment characterized by high occlusal forces. 12 maxillary first premolars were extracted and prepared for overlays. The Tizian overlays were subjected to 3000 alternating cycles of thermo-cycling (from -10°C to +50°C) and to mechanical occlusal overloads (at 800 N). A fast SS OCT system was used to evaluate the Tizian overlays before and after the mechanical and thermal straining. The SS (Axsun Technologies, Billerica, MA) has a central wavelength of 1060 nm, sweeping range of 106 nm (quoted at 10 dB) and a 100 kHz line rate. The depth resolution of the system, measured experimentally in air was 10 μm. The imaging system used for this study offers high spatial resolutions in both directions, transversal and longitudinal of around 10 μm, a high sensitivity, and it is also able to acquire entire tridimensional (3D)/volume reconstructions as fast as 2.5 s. Once the full dataset was acquired, rendered high resolutions en-face projections could be produced. Using them, the overlay (i.e., cement) abutment tooth interfaces were remarked both on B-scans/two-dimensional (2D) sections and in the 3D reconstructions. Using the system several open interfaces were possible to detect. The fast SS OCT system thus proves useful in the evaluation of zirconia reinforced composite overlays, placed in an environment characterized by high occlusal forces.

  8. Latest performance of ArF immersion scanner NSR-S630D for high-volume manufacturing for 7nm node

    NASA Astrophysics Data System (ADS)

    Funatsu, Takayuki; Uehara, Yusaku; Hikida, Yujiro; Hayakawa, Akira; Ishiyama, Satoshi; Hirayama, Toru; Kono, Hirotaka; Shirata, Yosuke; Shibazaki, Yuichi

    2015-03-01

    In order to achieve stable operation in cutting-edge semiconductor manufacturing, Nikon has developed NSR-S630D with extremely accurate overlay while maintaining throughput in various conditions resembling a real production environment. In addition, NSR-S630D has been equipped with enhanced capabilities to maintain long-term overlay stability and user interface improvement all due to our newly developed application software platform. In this paper, we describe the most recent S630D performance in various conditions similar to real productions. In a production environment, superior overlay accuracy with high dose conditions and high throughput are often required; therefore, we have performed several experiments with high dose conditions to demonstrate NSR's thermal aberration capabilities in order to achieve world class overlay performance. Furthermore, we will introduce our new software that enables long term overlay performance.

  9. Detection of magnetic circular dichroism in amorphous materials utilizing a single-crystalline overlayer

    DOE PAGES

    Lin, J.; Zhong, X. Y.; Song, C.; ...

    2017-12-27

    Physicists are fascinated with topological defects in solid-state materials, because by breaking the translational symmetry they offer emerging properties that are not present in their parental phases. For example, edge dislocations—the 2π phase-winding topological defects—in antiferromagnetic NiO crystals can exhibit ferromagnetic behaviors. Herein, we study how these defects could give rise to exotic topological orders when they interact with a high energy electron beam. To probe this interaction, we formed a coherent electron nanobeam in a scanning transmission electron microscope and recorded the far-field transmitted patterns as the beam steps through the edge dislocation core in [001] NiO. Surprisingly, wemore » found the amplitude patterns of the <020> Bragg disks evolve in a similar manner to the evolution of an annular solar eclipse. Using the ptychographic technique, we recovered the missing phase information in the diffraction plane and revealed the topological phase vortices in the diffracted beams. Through atomic topological defects, the wave function of electrons can be converted from plane wave to electron vortex. This approach provides a new perspective for boosting the collection efficiency of magnetic circular dichroism spectra with high spatial resolution and understanding the relationship between symmetry breaking and exotic property of individual topological defect at atomic level.« less

  10. Detection of magnetic circular dichroism in amorphous materials utilizing a single-crystalline overlayer

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Lin, J.; Zhong, X. Y.; Song, C.

    Physicists are fascinated with topological defects in solid-state materials, because by breaking the translational symmetry they offer emerging properties that are not present in their parental phases. For example, edge dislocations—the 2π phase-winding topological defects—in antiferromagnetic NiO crystals can exhibit ferromagnetic behaviors. Herein, we study how these defects could give rise to exotic topological orders when they interact with a high energy electron beam. To probe this interaction, we formed a coherent electron nanobeam in a scanning transmission electron microscope and recorded the far-field transmitted patterns as the beam steps through the edge dislocation core in [001] NiO. Surprisingly, wemore » found the amplitude patterns of the <020> Bragg disks evolve in a similar manner to the evolution of an annular solar eclipse. Using the ptychographic technique, we recovered the missing phase information in the diffraction plane and revealed the topological phase vortices in the diffracted beams. Through atomic topological defects, the wave function of electrons can be converted from plane wave to electron vortex. This approach provides a new perspective for boosting the collection efficiency of magnetic circular dichroism spectra with high spatial resolution and understanding the relationship between symmetry breaking and exotic property of individual topological defect at atomic level.« less

  11. Guide to cement-based integrated pavement solutions.

    DOT National Transportation Integrated Search

    2011-08-01

    This guide provides a clear, concise, and cohesive presentation of cement-bound materials options for 10 : specific engineering pavement applications: new concrete pavements, concrete overlays, pervious concrete, : precast pavements, roller-compacted...

  12. Solar selective absorption coatings

    DOEpatents

    Mahoney, Alan R [Albuquerque, NM; Reed, Scott T [Albuquerque, NM; Ashley, Carol S [Albuquerque, NM; Martinez, F Edward [Horseheads, NY

    2004-08-31

    A new class of solar selective absorption coatings are disclosed. These coatings comprise a structured metallic overlayer such that the overlayer has a sub-micron structure designed to efficiently absorb solar radiation, while retaining low thermal emissivity for infrared thermal radiation. A sol-gel layer protects the structured metallic overlayer from mechanical, thermal, and environmental degradation. Processes for producing such solar selective absorption coatings are also disclosed.

  13. Solar selective absorption coatings

    DOEpatents

    Mahoney, Alan R [Albuquerque, NM; Reed, Scott T [Albuquerque, NM; Ashley, Carol S [Albuquerque, NM; Martinez, F Edward [Horseheads, NY

    2003-10-14

    A new class of solar selective absorption coatings are disclosed. These coatings comprise a structured metallic overlayer such that the overlayer has a sub-micron structure designed to efficiently absorb solar radiation, while retaining low thermal emissivity for infrared thermal radiation. A sol-gel layer protects the structured metallic overlayer from mechanical, thermal, and environmental degradation. Processes for producing such solar selective absorption coatings are also disclosed.

  14. Effects of Spectral Overlays on Reading Performance of Brazilian Elementary School Children.

    PubMed

    Garcia, Ana Carla Oliveira; Momensohn-Santos, Teresa Maria; Vilhena, Douglas de Araújo

    2018-03-20

    To investigate the effects of spectral overlays on reading performance of Brazilian elementary school children. Sixty-eight children (aged 9-12 years) enrolled in the 5th and 6th grade were included in the study. The Rate of Reading Test (RRT - Brazilian Portuguese version) was used to evaluate reading speed and the Irlen Reading Perceptual Scale was used to allocate the sample according to reading difficulty/discomfort symptoms and to define the optimal spectral overlays. A total of 13% of the children presented an improvement of at least 15% in reading speed with the use of spectral overlays. Pupils with severe reading difficulties tended to have more improvement in RRT with spectral overlays. Children with severe reading discomfort obtained the highest gains in RRT, with an average of 9.6% improvement with intervention, compared to a decrease of -8.2% in the control group. Participants with severe discomfort had an odds ratio of 3.36 to improve reading speed with intervention compared to the control group. The use of spectral overlays can improve reading performance, particularly in those children with severe visual discomfort. © 2018 S. Karger AG, Basel.

  15. Electronic structure of uranium overlayers on magnesium and aluminium

    NASA Astrophysics Data System (ADS)

    Gouder, T.

    1997-06-01

    We studied U overlayers on polycrystalline Mg and Al by X-ray and ultra-violet photoelectron spectroscopies (XPS and UPS, respectively), and compared the mode of growth and the evolution of the electronic structure as a function of coverage. The goal of this work was to detect localization, or at least correlation effects, in U overlayers and U substrate near surface alloys, which were expected to occur because of the reduced U 5f bandwidth in these systems. On Mg, U deposits as a pure overlayer without any interdiffusion, while on Al spontaneous interdiffusion takes place. The U 4f spectra of {U}/{Mg} show only weak correlation satellites. Nevertheless, the asymmetrical shape of the U 4f peak indicates 5f band narrowing. On Al, strong correlation satellites are observed in addition to plasmon loss features. It seems that U-substrate interactions promote correlation effects, while the reduced coordination in overlayers plays a less important role. UPS valence-band (VB) spectra of the two systems look remarkably similar. They do not show any correlation satellites. With decreasing overlayer thickness the 5f peak narrows, which is attributed to 5f band narrowing at the surface.

  16. Overlay leaves litho: impact of non-litho processes on overlay and compensation

    NASA Astrophysics Data System (ADS)

    Ruhm, Matthias; Schulz, Bernd; Cotte, Eric; Seltmann, Rolf; Hertzsch, Tino

    2014-10-01

    According to the ITRS roadmap [1], the overlay requirement for the 28nm node is 8nm. If we compare this number with the performance given by tool vendors for their most advanced immersion systems (which is < 3nm), there seems to remain a large margin. Does that mean that today's leading edge Fab has an easy life? Unfortunately not, as other contributors affecting overlay are emerging. Mask contributions and so-called non-linear wafer distortions are known effects that can impact overlay quite significantly. Furthermore, it is often forgotten that downstream (post-litho) processes can impact the overlay as well. Thus, it can be required to compensate for the effects of subsequent processes already at the lithography operation. Within our paper, we will briefly touch on the wafer distortion topic and discuss the limitations of lithography compensation techniques such as higher order corrections versus solving the root cause of the distortions. The primary focus will be on the impact of the etch processes on the pattern placement error. We will show how individual layers can get affected differently by showing typical wafer signatures. However, in contrast to the above-mentioned wafer distortion topic, lithographic compensation techniques can be highly effective to reduce the placement error significantly towards acceptable levels (see Figure 1). Finally we will discuss the overall overlay budget for a 28nm contact to gate case by taking the impact of the individual process contributors into account.

  17. Creating Interactive Graphical Overlays in the Advanced Weather Interactive Processing System (AWIPS) Using Shapefiles and DGM Files

    NASA Technical Reports Server (NTRS)

    Barrett, Joe H., III; Lafosse, Richard; Hood, Doris; Hoeth, Brian

    2007-01-01

    Graphical overlays can be created in real-time in the Advanced Weather Interactive Processing System (AWIPS) using shapefiles or DARE Graphics Metafile (DGM) files. This presentation describes how to create graphical overlays on-the-fly for AWIPS, by using two examples of AWIPS applications that were created by the Applied Meteorology Unit (AMU). The first example is the Anvil Threat Corridor Forecast Tool, which produces a shapefile that depicts a graphical threat corridor of the forecast movement of thunderstorm anvil clouds, based on the observed or forecast upper-level winds. This tool is used by the Spaceflight Meteorology Group (SMG) and 45th Weather Squadron (45 WS) to analyze the threat of natural or space vehicle-triggered lightning over a location. The second example is a launch and landing trajectory tool that produces a DGM file that plots the ground track of space vehicles during launch or landing. The trajectory tool can be used by SMG and the 45 WS forecasters to analyze weather radar imagery along a launch or landing trajectory. Advantages of both file types will be listed.

  18. Tunable in-line fiber optic comb filter using a side-polished single-mode fiber coupler with LiNbO 3 overlay and intermediate coupling layer

    NASA Astrophysics Data System (ADS)

    Sohn, Kyung-Rak; Song, Jae-Won

    2002-03-01

    Using a side-polished single-mode fiber covered with a polished LiNbO 3 overlay and an intermediate coupling layer, tunable fiber-optic comb filters are demonstrated. The device behaviors based on the modal properties of the fiber and the planar LiNbO 3 waveguide are analyzed by two dimensional beam propagation methods (2-D BPM) and discussed the role of an intermediate coupling layer in terms of coupling efficiency. We also show that the thermo-optic effects of this layer can be utilized to tune the comb filter. When the polished x-cut LiNbO 3 with 200 μm thickness is used as a multimode overlay waveguide, the comb output spectra with free spectral range of 4 nm are measured in 1550 nm wavelength range. The tuning rate as a function of the refractive index of an intermediate coupling layer, Δλ/ Δnb, is about -0.129 nm/-0.001. The experimental results are in good agreement with the calculated results.

  19. The Effects of a Dynamic Spectrum Access Overlay in LTE-Advanced Networks

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Juan D. Deaton; Ryan E. lrwin; Luiz A. DaSilva

    As early as 2014, wireless network operators spectral capacity will be overwhelmed by a data tsunami brought on by new devices and applications. To augment spectral capacity, operators could deploy a Dynamic Spectrum Access (DSA) overlay. In the light of the many planned Long Term Evolution (LTE) network deployments, the affects of a DSA overlay have not been fully considered into the existing LTE standards. Coalescing many different aspects of DSA, this paper develops the Spectrum Accountability (SA) framework. The SA framework defines specific network element functionality, protocol interfaces, and signaling flow diagrams for LTE to support service requests andmore » enforce rights of responsibilities of primary and secondary users, respectively. We also include a network simulation to quantify the benefits of using DSA channels to augment capacity. Based on our simulation we show that, network operators can benefit up to %40 increase in operating capacity when sharing DSA bands to augment spectral capacity. With our framework, this paper could serve as an guide in developing future LTE network standards that include DSA.« less

  20. Wafer-shape metrics based foundry lithography

    NASA Astrophysics Data System (ADS)

    Kim, Sungtae; Liang, Frida; Mileham, Jeffrey; Tsai, Damon; Bouche, Eric; Lee, Sean; Huang, Albert; Hua, C. F.; Wei, Ming Sheng

    2017-03-01

    As device shrink, there are many difficulties with process integration and device yield. Lithography process control is expected to be a major challenge due to tighter overlay and focus control requirement. The understanding and control of stresses accumulated during device fabrication has becoming more critical at advanced technology nodes. Within-wafer stress variations cause local wafer distortions which in turn present challenges for managing overlay and depth of focus during lithography. A novel technique for measuring distortion is Coherent Gradient Sensing (CGS) interferometry, which is capable of generating a high-density distortion data set of the full wafer within a time frame suitable for a high volume manufacturing (HVM) environment. In this paper, we describe the adoption of CGS (Coherent Gradient Sensing) interferometry into high volume foundry manufacturing to overcome these challenges. Leveraging this high density 3D metrology, we characterized its In-plane distortion as well as its topography capabilities applied to the full flow of an advanced foundry manufacturing. Case studies are presented that summarize the use of CGS data to reveal correlations between in-plane distortion and overlay variation as well as between topography and device yield.

  1. Overlay coating degradation by simultaneous oxidation and coating/substrate interdiffusion. Ph.D. Thesis

    NASA Technical Reports Server (NTRS)

    Nesbitt, J. A.

    1983-01-01

    Degradation of NiCrAlZr overlay coatings on various NiCrAl substrates was examined after cyclic oxidation. Concentration/distance profiles were measured in the coating and substrate after various oxidation exposures at 1150 C. For each stubstrate, the Al content in the coating decreased rapidly. The concentration/distance profiles, and particularly that for Al, reflected the oxide spalling resistance of each coated substrate. A numerical model was developed to simulate diffusion associated with overlay-coating degradation by oxidation and coating/substrate interdiffusion. Input to the numerical model consisted of the Cr and Al content of the coating and substrate, ternary diffusivities, and various oxide spalling parameters. The model predicts the Cr and Al concentrations in the coating and substrate after any number of oxidation/thermal cycles. The numerical model also predicts coating failure based on the ability of the coating to supply sufficient Al to the oxide scale. The validity of the model was confirmed by comparison of the predicted and measured concentration/distance profiles. The model was subsequently used to identify the most critical system parameters affecting coating life.

  2. Complete Overlay Denture for Pedodontic Patient with Severe Dentinogenesis Imperfecta.

    PubMed

    Syriac, Gibi; Joseph, Elizabeth; Rupesh, Suresh; Mathew, Josey

    2017-01-01

    Dentinogenesis imperfecta (DI) is a hereditary condition that may affect both primary and permanent dentition and is characterized by abnormal dentin formation. The teeth may be discolored with chipping of enamel and, in untreated cases, the entire dentition may wear off to the gingiva. This may lead to the formation of abscesses, tooth mobility, and early loss of teeth. In the Indian population, DI is found to have an incidence of 0.09%. Treatment of DI should aim to remove infection, if any, from the oral cavity; restore form, function, and esthetics; and protect posterior teeth from wear for maintaining the occlusal vertical dimension. Treatment strategies should be selected based on the presenting complaint of the patient, patient's age, and severity of the problem. This case report presents the management of severe DI with tooth worn off until gingival level in a very young patient using complete overlay denture, which has not been reported earlier. How to cite this article: Syriac G, Joseph E, Rupesh S, Mathew J. Complete Overlay Denture for Pedodontic Patient with Severe Dentinogenesis Imperfecta. Int J Clin Pediatr Dent 2017;10(4):394-398.

  3. Study of submonolayer films of Au/Cu(100) and Pd/Cu(100) using positron annihilation induced auger electron spectroscopy

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Lee, K.D.

    1992-01-01

    Positron Annihilation induced Auger Electron Spectroscopy (PAES), electron induced Auger Electron Spectroscopy (EAES), and Low Energy Electron Diffraction (LEED) have been used to study the surface composition, surface alloying and overlayer formation of ultrathin films of Au and Pd on Cu(100). This is the first systematic application of PAES to the study of the surface properties of ultrathin layers of metals on metal substrates. Temperature induced changes in the top layer surface compositions in Au/Cu(100) and Pd/Cu(100) are directly observed using PAES, while EAES spectra indicate only minor changes. The surface alloying of the Au/Cu(100) and Pd/Cu(100) systems are demonstratedmore » using PAES in conjunction with LEED. The PAES intensity measurements also provide evidence for positron trapping at surface defects such as steps, kinks and isolated adatoms. The PAES intensity was found to be strongly dependent on surface effects introduced by ion sputtering. The surface defect dependence of the PAES intensity is interpreted in terms of the surface atomic diffusion and positron trapping at surface defects in Au/Cu(100) and Pd/Cu(100). In both systems the shapes of the PAES intensity versus coverage curves for submonolayer coverages at 173K are quite distinct indicating differences in overlayer growth and diffusion behavior of Au and Pd adatoms on the Cu(100) surface. PAES intensities for both Au and Pd are saturated at 1 monolayer demonstrating the extreme surface selectivity of PAES.« less

  4. Thermal barrier coatings

    DOEpatents

    Alvin, Mary Anne [Pittsburg, PA

    2010-06-22

    This disclosure addresses the issue of providing a metallic-ceramic overlay coating that potentially serves as an interface or bond coat layer to provide enhanced oxidation resistance to the underlying superalloy substrate via the formation of a diffusion barrier regime within the supporting base material. Furthermore, the metallic-ceramic coating is expected to limit the growth of a continuous thermally grown oxide (TGO) layer that has been primarily considered to be the principal cause for failure of existing TBC systems. Compositional compatibility of the metallic-ceramic with traditional yttria-stabilized zirconia (YSZ) top coats is provided to further limit debond or spallation of the coating during operational use. A metallic-ceramic architecture is disclosed wherein enhanced oxidation resistance is imparted to the surface of nickel-based superalloy or single crystal metal substrate, with simultaneous integration of the yttria stabilized zirconia (YSZ) within the metallic-ceramic overlayer.

  5. Large-Scale Overlays and Trends: Visually Mining, Panning and Zooming the Observable Universe.

    PubMed

    Luciani, Timothy Basil; Cherinka, Brian; Oliphant, Daniel; Myers, Sean; Wood-Vasey, W Michael; Labrinidis, Alexandros; Marai, G Elisabeta

    2014-07-01

    We introduce a web-based computing infrastructure to assist the visual integration, mining and interactive navigation of large-scale astronomy observations. Following an analysis of the application domain, we design a client-server architecture to fetch distributed image data and to partition local data into a spatial index structure that allows prefix-matching of spatial objects. In conjunction with hardware-accelerated pixel-based overlays and an online cross-registration pipeline, this approach allows the fetching, displaying, panning and zooming of gigabit panoramas of the sky in real time. To further facilitate the integration and mining of spatial and non-spatial data, we introduce interactive trend images-compact visual representations for identifying outlier objects and for studying trends within large collections of spatial objects of a given class. In a demonstration, images from three sky surveys (SDSS, FIRST and simulated LSST results) are cross-registered and integrated as overlays, allowing cross-spectrum analysis of astronomy observations. Trend images are interactively generated from catalog data and used to visually mine astronomy observations of similar type. The front-end of the infrastructure uses the web technologies WebGL and HTML5 to enable cross-platform, web-based functionality. Our approach attains interactive rendering framerates; its power and flexibility enables it to serve the needs of the astronomy community. Evaluation on three case studies, as well as feedback from domain experts emphasize the benefits of this visual approach to the observational astronomy field; and its potential benefits to large scale geospatial visualization in general.

  6. Zinc Sulphide Overlayer Two-Dimensional Photonic Crystal for Enhanced Extraction of Light from a Micro Cavity Light-Emitting Diode

    NASA Astrophysics Data System (ADS)

    Mastro, Michael A.; Kim, Chul Soo; Kim, Mijin; Caldwell, Josh; Holm, Ron T.; Vurgaftman, Igor; Kim, Jihyun; Eddy, Charles R., Jr.; Meyer, Jerry R.

    2008-10-01

    A two-dimensional (2D) ZnS photonic crystal was deposited on the surface of a one-dimensional (1D) III-nitride micro cavity light-emitting diode (LED), to intermix the light extraction features of both structures (1D+2D). The deposition of an ideal micro-cavity optical thickness of ≈λ/2 is impractical for III-nitride LEDs, and in realistic multi-mode devices a large fraction of the light is lost to internal refraction as guided light. Therefore, a 2D photonic crystal on the surface of the LED was used to diffract and thus redirect this guided light out of the semiconductor over several hundred microns. Additionally, the employment of a post-epitaxy ZnS 2D photonic crystal avoided the typical etching into the GaN:Mg contact layer, a procedure which can cause damage to the near surface.

  7. Ultrathin IBAD MgO films for epitaxial growth on amorphous substrates and sub-50 nm membranes

    DOE PAGES

    Wang, Siming; Antonakos, C.; Bordel, C.; ...

    2016-11-07

    Here, a fabrication process has been developed for high energy ion beam assisted deposition (IBAD) biaxial texturing of ultrathin (~1 nm) MgO films, using a high ion-to-atom ratio and post-deposition annealing instead of a homoepitaxial MgO layer. These films serve as the seed layer for epitaxial growth of materials on amorphous substrates such as electron/X-ray transparent membranes or nanocalorimetry devices. Stress measurements and atomic force microscopy of the MgO films reveal decreased stress and surface roughness, while X-ray diffraction of epitaxial overlayers demonstrates the improved crystal quality of films grown epitaxially on IBAD MgO. The process simplifies the synthesis ofmore » IBAD MgO, fundamentally solves the “wrinkle” issue induced by the homoepitaxial layer on sub-50 nm membranes, and enables studies of epitaxial materials in electron/X-ray transmission and nanocalorimetry.« less

  8. Overlay improvement by exposure map based mask registration optimization

    NASA Astrophysics Data System (ADS)

    Shi, Irene; Guo, Eric; Chen, Ming; Lu, Max; Li, Gordon; Li, Rivan; Tian, Eric

    2015-03-01

    Along with the increased miniaturization of semiconductor electronic devices, the design rules of advanced semiconductor devices shrink dramatically. [1] One of the main challenges of lithography step is the layer-to-layer overlay control. Furthermore, DPT (Double Patterning Technology) has been adapted for the advanced technology node like 28nm and 14nm, corresponding overlay budget becomes even tighter. [2][3] After the in-die mask registration (pattern placement) measurement is introduced, with the model analysis of a KLA SOV (sources of variation) tool, it's observed that registration difference between masks is a significant error source of wafer layer-to-layer overlay at 28nm process. [4][5] Mask registration optimization would highly improve wafer overlay performance accordingly. It was reported that a laser based registration control (RegC) process could be applied after the pattern generation or after pellicle mounting and allowed fine tuning of the mask registration. [6] In this paper we propose a novel method of mask registration correction, which can be applied before mask writing based on mask exposure map, considering the factors of mask chip layout, writing sequence, and pattern density distribution. Our experiment data show if pattern density on the mask keeps at a low level, in-die mask registration residue error in 3sigma could be always under 5nm whatever blank type and related writer POSCOR (position correction) file was applied; it proves random error induced by material or equipment would occupy relatively fixed error budget as an error source of mask registration. On the real production, comparing the mask registration difference through critical production layers, it could be revealed that registration residue error of line space layers with higher pattern density is always much larger than the one of contact hole layers with lower pattern density. Additionally, the mask registration difference between layers with similar pattern density could also achieve under 5nm performance. We assume mask registration excluding random error is mostly induced by charge accumulation during mask writing, which may be calculated from surrounding exposed pattern density. Multi-loading test mask registration result shows that with x direction writing sequence, mask registration behavior in x direction is mainly related to sequence direction, but mask registration in y direction would be highly impacted by pattern density distribution map. It proves part of mask registration error is due to charge issue from nearby environment. If exposure sequence is chip by chip for normal multi chip layout case, mask registration of both x and y direction would be impacted analogously, which has also been proved by real data. Therefore, we try to set up a simple model to predict the mask registration error based on mask exposure map, and correct it with the given POSCOR (position correction) file for advanced mask writing if needed.

  9. Enhanced Performance of Field-Effect Transistors Based on Black Phosphorus Channels Reduced by Galvanic Corrosion of Al Overlayers.

    PubMed

    Lee, Sangik; Yoon, Chansoo; Lee, Ji Hye; Kim, Yeon Soo; Lee, Mi Jung; Kim, Wondong; Baik, Jaeyoon; Jia, Quanxi; Park, Bae Ho

    2018-06-06

    Two-dimensional (2D)-layered semiconducting materials with considerable band gaps are emerging as a new class of materials applicable to next-generation devices. Particularly, black phosphorus (BP) is considered to be very promising for next-generation 2D electrical and optical devices because of its high carrier mobility of 200-1000 cm 2 V -1 s -1 and large on/off ratio of 10 4 to 10 5 in field-effect transistors (FETs). However, its environmental instability in air requires fabrication processes in a glovebox filled with nitrogen or argon gas followed by encapsulation, passivation, and chemical functionalization of BP. Here, we report a new method for reduction of BP-channel devices fabricated without the use of a glovebox by galvanic corrosion of an Al overlayer. The reduction of BP induced by an anodic oxidation of Al overlayer is demonstrated through surface characterization of BP using atomic force microscopy, Raman spectroscopy, and X-ray photoemission spectroscopy along with electrical measurement of a BP-channel FET. After the deposition of an Al overlayer, the FET device shows a significantly enhanced performance, including restoration of ambipolar transport, high carrier mobility of 220 cm 2 V -1 s -1 , low subthreshold swing of 0.73 V/decade, and low interface trap density of 7.8 × 10 11 cm -2 eV -1 . These improvements are attributed to both the reduction of the BP channel and the formation of an Al 2 O 3 interfacial layer resulting in a high- k screening effect. Moreover, ambipolar behavior of our BP-channel FET device combined with charge-trap behavior can be utilized for implementing reconfigurable memory and neuromorphic computing applications. Our study offers a simple device fabrication process for BP-channel FETs with high performance using galvanic oxidation of Al overlayers.

  10. Sintered electrode for solid oxide fuel cells

    DOEpatents

    Ruka, Roswell J.; Warner, Kathryn A.

    1999-01-01

    A solid oxide fuel cell fuel electrode is produced by a sintering process. An underlayer is applied to the electrolyte of a solid oxide fuel cell in the form of a slurry, which is then dried. An overlayer is applied to the underlayer and then dried. The dried underlayer and overlayer are then sintered to form a fuel electrode. Both the underlayer and the overlayer comprise a combination of electrode metal such as nickel, and stabilized zirconia such as yttria-stabilized zirconia, with the overlayer comprising a greater percentage of electrode metal. The use of more stabilized zirconia in the underlayer provides good adhesion to the electrolyte of the fuel cell, while the use of more electrode metal in the overlayer provides good electrical conductivity. The sintered fuel electrode is less expensive to produce compared with conventional electrodes made by electrochemical vapor deposition processes. The sintered electrodes exhibit favorable performance characteristics, including good porosity, adhesion, electrical conductivity and freedom from degradation.

  11. A Preliminary Study of Building a Transmission Overlay for Regional US Power Grid

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Lei, Yin; Li, Yalong; Liu, Yilu

    2015-01-01

    Many European countries have taken steps toward a Supergrid in order to transmit large amount of intermittent and remote renewable energy over long distance to load centers. In the US, as the expected increase in renewable generation and electricity demand, similar problem arises. A potential solution is to upgrade the transmission system at a higher voltage by constructing a new overlay grid. This paper will first address basic requirements for such an overlay grid. Potential transmission technologies will also be discussed. A multi-terminal VSC HVDC model is developed in DSATools to implement the overlay grid and a test case onmore » a regional NPCC system will be simulated. Another test system of entire US power grid, with three different interconnections tied together using back-to-back HVDC, is also introduced in this paper. Building an overlay system on top of this test case is ongoing, and will be discussed in future work.« less

  12. Vertical electrical impedance evaluation of asphalt overlays on concrete bridge decks

    NASA Astrophysics Data System (ADS)

    Baxter, Jared S.; Guthrie, W. Spencer; Waters, Tenli; Barton, Jeffrey D.; Mazzeo, Brian A.

    2018-04-01

    Vertical electrical impedance scanning of concrete bridge decks is a non-destructive method for quantifying the degree of protection provided to steel reinforcement against the ingress of corrosive agents. Four concrete bridge decks with asphalt overlays in northern Utah were evaluated using scanning vertical electrical impedance measurements in this study. At the time of testing, the bridges ranged in age from 21 to 34 years, and asphalt overlays had been in place for 7 to 22 years, depending on the bridge. Electrical impedance measurements were collected using a previously constructed apparatus that consisted of six probes spanning a transverse distance of 12 ft. The impedance measurements were compared to surface cracking observations and cores obtained from the same four bridge decks. The results presented in this paper demonstrate the utility of scanning vertical electrical impedance measurements for detecting cracks in asphalt overlays and quantifying their severity. In addition, the results demonstrate the sensitivity of impedance measurements to the presence of an intact membrane beneath the asphalt overlay.

  13. Sintered electrode for solid oxide fuel cells

    DOEpatents

    Ruka, R.J.; Warner, K.A.

    1999-06-01

    A solid oxide fuel cell fuel electrode is produced by a sintering process. An underlayer is applied to the electrolyte of a solid oxide fuel cell in the form of a slurry, which is then dried. An overlayer is applied to the underlayer and then dried. The dried underlayer and overlayer are then sintered to form a fuel electrode. Both the underlayer and the overlayer comprise a combination of electrode metal such as nickel, and stabilized zirconia such as yttria-stabilized zirconia, with the overlayer comprising a greater percentage of electrode metal. The use of more stabilized zirconia in the underlayer provides good adhesion to the electrolyte of the fuel cell, while the use of more electrode metal in the overlayer provides good electrical conductivity. The sintered fuel electrode is less expensive to produce compared with conventional electrodes made by electrochemical vapor deposition processes. The sintered electrodes exhibit favorable performance characteristics, including good porosity, adhesion, electrical conductivity and freedom from degradation. 4 figs.

  14. Ru sub 3 (CO) sub 12 and Mo (CO) sub 6 overlayers adsorbed on Ru(001) and Au/Ru and their interaction with electrons and photons: An infrared reflection--absorption study

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Malik, I.J.; Hrbek, J.

    1991-05-01

    We studied adsorbed Ru{sub 3}(CO){sub 12} and Mo (CO){sub 6} overlayers on Ru(001) and Au/Ru surfaces by infrared reflection--absorption spectroscopy (IRAS) and thermal desorption spectroscopy (TDS). We characterized the C--O stretching mode of both metal carbonyls (4 cm{sup {minus}1} FWHM) and a deformation mode of Mo (CO){sub 6} at 608 cm{sup {minus}1} with an unusually narrow FWHM of 1 cm{sup {minus}1}. Both IRAS and TDS data suggest adsorption and desorption of metal carbonyls as molecular species with a preferential orientation in the overlayers. We discuss annealing experiments of Ru{sub 3}(CO){sub 12}/Ru(001), the interaction of Ru{sub 3}(CO){sub 12} overlayers with electronsmore » of up to 100-eV energy, and the interaction of Mo (CO){sub 6} overlayers with 300-nm photons.« less

  15. Design of a monitor and simulation terminal (master) for space station telerobotics and telescience

    NASA Technical Reports Server (NTRS)

    Lopez, L.; Konkel, C.; Harmon, P.; King, S.

    1989-01-01

    Based on Space Station and planetary spacecraft communication time delays and bandwidth limitations, it will be necessary to develop an intelligent, general purpose ground monitor terminal capable of sophisticated data display and control of on-orbit facilities and remote spacecraft. The basic elements that make up a Monitor and Simulation Terminal (MASTER) include computer overlay video, data compression, forward simulation, mission resource optimization and high level robotic control. Hardware and software elements of a MASTER are being assembled for testbed use. Applications of Neural Networks (NNs) to some key functions of a MASTER are also discussed. These functions are overlay graphics adjustment, object correlation and kinematic-dynamic characterization of the manipulator.

  16. Optimizing Training Event Schedules at Naval Air Station Fallon

    DTIC Science & Technology

    2018-03-01

    popularly known as Topgun. Fallon training range airspace overlays 10,200 square miles and contains ground ranges for bombing and electronic warfare. In...Fighter Weapons School, popularly known as Topgun. Fallon training range airspace overlays 10,200 square miles and contains ground ranges for bombing and...popularly known as Topgun. Fallon training range airspace overlays 10,200 squaremiles, and contains ground ranges for bombing and electronic warfare. In

  17. Robotic weld overlay coatings for erosion control

    NASA Astrophysics Data System (ADS)

    The erosion of materials by the impact of solid particles has received increasing attention during the past twenty years. Recently, research has been initiated with the event of advanced coal conversion processes in which erosion plays an important role. The resulting damage, termed Solid Particle Erosion (SPE), is of concern primarily because of the significantly increased operating costs which result in material failures. Reduced power plant efficiency due to solid particle erosion of boiler tubes and waterfalls has led to various methods to combat SPE. One method is to apply coatings to the components subjected to erosive environments. Protective weld overlay coatings are particularly advantageous in terms of coating quality. The weld overlay coatings are essentially immune to spallation due to a strong metallurgical bond with the substrate material. By using powder mixtures, multiple alloys can be mixed in order to achieve the best performance in an erosive environment. However, a review of the literature revealed a lack of information on weld overlay coating performance in erosive environments which makes the selection of weld overlay alloys a difficult task. The objective of this project is to determine the effects of weld overlay coating composition and microstructure on erosion resistance. These results will lead to a better understanding of erosion mitigation in CFB's.

  18. Implementation and benefits of advanced process control for lithography CD and overlay

    NASA Astrophysics Data System (ADS)

    Zavyalova, Lena; Fu, Chong-Cheng; Seligman, Gary S.; Tapp, Perry A.; Pol, Victor

    2003-05-01

    Due to the rapidly reduced imaging process windows and increasingly stingent device overlay requirements, sub-130 nm lithography processes are more severely impacted than ever by systamic fault. Limits on critical dimensions (CD) and overlay capability further challenge the operational effectiveness of a mix-and-match environment using multiple lithography tools, as such mode additionally consumes the available error budgets. Therefore, a focus on advanced process control (APC) methodologies is key to gaining control in the lithographic modules for critical device levels, which in turn translates to accelerated yield learning, achieving time-to-market lead, and ultimately a higher return on investment. This paper describes the implementation and unique challenges of a closed-loop CD and overlay control solution in high voume manufacturing of leading edge devices. A particular emphasis has been placed on developing a flexible APC application capable of managing a wide range of control aspects such as process and tool drifts, single and multiple lot excursions, referential overlay control, 'special lot' handling, advanced model hierarchy, and automatic model seeding. Specific integration cases, including the multiple-reticle complementary phase shift lithography process, are discussed. A continuous improvement in the overlay and CD Cpk performance as well as the rework rate has been observed through the implementation of this system, and the results are studied.

  19. The challenges of transitioning from linear to high-order overlay control in advanced lithography

    NASA Astrophysics Data System (ADS)

    Adel, M.; Izikson, P.; Tien, D.; Huang, C. K.; Robinson, J. C.; Eichelberger, B.

    2008-03-01

    In the lithography section of the ITRS 2006 update, at the top of the list of difficult challenges appears the text "overlay of multiple exposures including mask image placement". This is a reflection of the fact that today overlay is becoming a major yield risk factor in semiconductor manufacturing. Historically, lithographers have achieved sufficient alignment accuracy and hence layer to layer overlay control by relying on models which define overlay as a linear function of the field and wafer coordinates. These linear terms were easily translated to correctibles in the available exposure tool degrees of freedom on the wafer and reticle stages. However, as the 45 nm half pitch node reaches production, exposure tool vendors have begun to make available, and lithographers have begun to utilize so called high order wafer and field control, in which either look up table or high order polynomial models are modified on a product by product basis. In this paper, the major challenges of this transition will be described. It will include characterization of the sources of variation which need to be controlled by these new models and the overlay and alignment sampling optimization problem which needs to be addressed, while maintaining the ever tightening demands on productivity and cost of ownership.

  20. The effect of augmented reality training on percutaneous needle placement in spinal facet joint injections.

    PubMed

    Yeo, Caitlin T; Ungi, Tamas; U-Thainual, Paweena; Lasso, Andras; McGraw, Robert C; Fichtinger, Gabor

    2011-07-01

    The purpose of this study was to determine if augmented reality image overlay and laser guidance systems can assist medical trainees in learning the correct placement of a needle for percutaneous facet joint injection. The Perk Station training suite was used to conduct and record the needle insertion procedures. A total of 40 volunteers were randomized into two groups of 20. 1) The Overlay group received a training session that consisted of four insertions with image and laser guidance, followed by two insertions with laser overlay only. 2) The Control group received a training session of six classical freehand insertions. Both groups then conducted two freehand insertions. The movement of the needle was tracked during the series of insertions. The final insertion procedure was assessed to determine if there was a benefit to the overlay method compared to the freehand insertions. The Overlay group had a better success rate (83.3% versus 68.4%, p=0.002), and potential for less tissue damage as measured by the amount of needle movement inside the phantom (3077.6 mm(2) versus 5607.9 mm(2) , p =0.01). These results suggest that an augmented reality overlay guidance system can assist medical trainees in acquiring technical competence in a percutaneous needle insertion procedure. © 2011 IEEE

  1. Evaluation of Troxler model 3411 nuclear gage.

    DOT National Transportation Integrated Search

    1978-01-01

    The performance of the Troxler Electronics Laboratory Model 3411 nuclear gage was evaluated through laboratory tests on the Department's density and moisture standards and field tests on various soils, base courses, and bituminous concrete overlays t...

  2. Programing Procedures Manual (PPM).

    DTIC Science & Technology

    1981-12-15

    terms ’reel’, ’unit’, and ’volume’ are synonymous and completely interchangeable in the CLOSE statement. Treatment of sequential mass storage files is...logically equivalent to the treatment of a file on tape or analogous sequential media. * For the purpose of showing the effect of various types of CLOSE...Overlay Area CA6 Address of Abend Relative to beginning of overlay segment The programer can now refer to the compile source listing for the overlay

  3. Assessment of the Potential for Color Overlays to Enhance the Reading Skills of Enlisted Navy Recruits

    DTIC Science & Technology

    2006-07-30

    as an intervention . Readers with MIS symptoms read significantly faster with their chosen overlay than without it. These findings justify further...recent years, the techniques for routine diagnosis and effective intervention methods for MIS have been improved and developed. Although Irlen is...The British Royal Navy, for example, screens for MIS on a case-by-case basis and provides overlays and filters as intervention . Furthermore

  4. Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides.

    PubMed

    Teng, Jie; Dumon, Pieter; Bogaerts, Wim; Zhang, Hongbo; Jian, Xigao; Han, Xiuyou; Zhao, Mingshan; Morthier, Geert; Baets, Roel

    2009-08-17

    Athermal silicon ring resonators are experimentally demonstrated by overlaying a polymer cladding on narrowed silicon wires. The ideal width to achieve athermal condition for the TE mode of 220 nm-height SOI waveguides is found to be around 350 nm. After overlaying a polymer layer, the wavelength temperature dependence of the silicon ring resonator is reduced to less than 5 pm/degrees C, almost eleven times less than that of normal silicon waveguides. The optical loss of a 350-nm bent waveguide (with a radius of 15 microm) is extracted from the ring transmission spectrum. The scattering loss is reduced to an acceptable level of about 50 dB/cm after overlaying a polymer cladding. (c) 2009 Optical Society of America

  5. Electrical and magnetic properties of conductive Cu-based coated conductors

    NASA Astrophysics Data System (ADS)

    Aytug, T.; Paranthaman, M.; Thompson, J. R.; Goyal, A.; Rutter, N.; Zhai, H. Y.; Gapud, A. A.; Ijaduola, A. O.; Christen, D. K.

    2003-11-01

    The development of YBa2Cu3O7-δ (YBCO)-based coated conductors for electric power applications will require electrical and thermal stabilization of the high-temperature superconducting (HTS) coating. In addition, nonmagnetic tape substrates are an important factor in order to reduce the ferromagnetic hysteresis energy loss in ac applications. We report progress toward a conductive buffer layer architecture on biaxially textured nonmagnetic Cu tapes to electrically couple the HTS layer to the underlying metal substrate. A protective Ni overlayer, followed by a single buffer layer of La0.7Sr0.3MnO3, was employed to avoid Cu diffusion and to improve oxidation resistance of the substrate. Property characterizations of YBCO films on short prototype samples revealed self-field critical current density (Jc) values exceeding 2×106 A/cm2 at 77 K and good electrical connectivity. Magnetic hysteretic loss due to Ni overlayer was also investigated.

  6. A comparative study between xerographic, computer-assisted overlay generation and animated-superimposition methods in bite mark analyses.

    PubMed

    Tai, Meng Wei; Chong, Zhen Feng; Asif, Muhammad Khan; Rahmat, Rabiah A; Nambiar, Phrabhakaran

    2016-09-01

    This study was to compare the suitability and precision of xerographic and computer-assisted methods for bite mark investigations. Eleven subjects were asked to bite on their forearm and the bite marks were photographically recorded. Alginate impressions of the subjects' dentition were taken and their casts were made using dental stone. The overlays generated by xerographic method were obtained by photocopying the subjects' casts and the incisal edge outlines were then transferred on a transparent sheet. The bite mark images were imported into Adobe Photoshop® software and printed to life-size. The bite mark analyses using xerographically generated overlays were done by comparing an overlay to the corresponding printed bite mark images manually. In computer-assisted method, the subjects' casts were scanned into Adobe Photoshop®. The bite mark analyses using computer-assisted overlay generation were done by matching an overlay and the corresponding bite mark images digitally using Adobe Photoshop®. Another comparison method was superimposing the cast images with corresponding bite mark images employing the Adobe Photoshop® CS6 and GIF-Animator©. A score with a range of 0-3 was given during analysis to each precision-determining criterion and the score was increased with better matching. The Kruskal Wallis H test showed significant difference between the three sets of data (H=18.761, p<0.05). In conclusion, bite mark analysis using the computer-assisted animated-superimposition method was the most accurate, followed by the computer-assisted overlay generation and lastly the xerographic method. The superior precision contributed by digital method is discernible despite the human skin being a poor recording medium of bite marks. Copyright © 2016 Elsevier Ireland Ltd. All rights reserved.

  7. Diagnostic performance and color overlay pattern in shear wave elastography (SWE) for palpable breast mass.

    PubMed

    Park, Jiyoon; Woo, Ok Hee; Shin, Hye Seon; Cho, Kyu Ran; Seo, Bo Kyoung; Kang, Eun Young

    2015-10-01

    The purpose of this study is to evaluate the diagnostic performance of SWE in palpable breast mass and to compare with color overlay pattern in SWE with conventional US and quantitative SWE for assessing palpable breast mass. SWE and conventional breast US were performed in 133 women with 156 palpable breast lesions (81 benign, 75 malignant) between August 2013 to June 2014. Either pathology or periodic imaging surveillance more than 2 years was a reference standard. Existence of previous image was blinded to performing radiologists. US BI-RADS final assessment, qualitative and quantitative SWE measurements were evaluated. Diagnostic performances of grayscale US, SWE and US combined to SWE were calculated and compared. Correlation between pattern classification and quantitative SWE was evaluated. Both color overlay pattern and quantitative SWE improved the specificity of conventional US, from 81.48% to 96.30% (p=0.0005), without improvement in sensitivity. Color overlay pattern was significantly related to all quantitative SWE parameters and malignancy rate (p<0.0001.). The optimal cutoff of color overlay pattern was between 2 and 3. Emax with optimal cutoff at 45.1 kPa showed the highest Az value, sensitivity, specificity and accuracy among other quantitative SWE parameters (p<0.0001). Echogenic halo on grayscale US showed significant correlation with color overlay pattern and pathology (p<0.0001). In evaluation of palpable breast mass, conventional US combine to SWE improves specificity and reduces the number of biopsies that ultimately yield a benign result. Color overlay pattern classification is more quick and easy and may represent quantitative SWE measurements with similar diagnostic performances. Copyright © 2015 Elsevier Ireland Ltd. All rights reserved.

  8. A nanometric Rh overlayer on a metal foil surface as a highly efficient three-way catalyst.

    PubMed

    Misumi, Satoshi; Yoshida, Hiroshi; Hinokuma, Satoshi; Sato, Tetsuya; Machida, Masato

    2016-07-08

    Pulsed arc-plasma (AP) deposition of an Rh overlayer on an Fe-Cr-Al stainless steel foil produced a composite material that exhibited high activity for automotive three-way catalysis (TWC). The AP pulses deposited metallic Rh nanoparticles 1-3 nm in size, whose density on the surface increased with the number of pulses. This led to coalescence and grain growth on the foil surface and the eventual formation of a uniform two-dimensional Rh overlayer. Full coverage of the 51 μm-thick flat foil by a 3.2 nm-thick Rh overlayer was achieved after 1,000 pulses. A simulated TWC reaction using a miniature honeycomb fabricated using flat and corrugated foils with the Rh overlayers exhibited successful light-off at a practical gaseous hourly space velocity of 1.2 × 10(5) h(-1). The turnover frequency for the NO-CO reaction over the metallic honeycomb catalyst was ca. 80-fold greater than that achieved with a reference Rh/ZrO2-coated cordierite honeycomb prepared using a conventional wet impregnation and slurry coating procedure. Despite the nonporosity and low surface area of the foil-supported Rh overlayer compared with conventional powder catalysts (Rh/ZrO2), it is a promising alternative design for more efficient automotive catalysts that use less Rh loading.

  9. Gas Selectivity Control in Co3O4 Sensor via Concurrent Tuning of Gas Reforming and Gas Filtering using Nanoscale Hetero-Overlayer of Catalytic Oxides.

    PubMed

    Jeong, Hyun-Mook; Jeong, Seong-Yong; Kim, Jae-Hyeok; Kim, Bo-Young; Kim, Jun-Sik; Abdel-Hady, Faissal; Wazzan, Abdulaziz A; Al-Turaif, Hamad Ali; Jang, Ho Won; Lee, Jong-Heun

    2017-11-29

    Co 3 O 4 sensors with a nanoscale TiO 2 or SnO 2 catalytic overlayer were prepared by screen-printing of Co 3 O 4 yolk-shell spheres and subsequent e-beam evaporation of TiO 2 and SnO 2 . The Co 3 O 4 sensors with 5 nm thick TiO 2 and SnO 2 overlayers showed high responses (resistance ratios) to 5 ppm xylene (14.5 and 28.8) and toluene (11.7 and 16.2) at 250 °C with negligible responses to interference gases such as ethanol, HCHO, CO, and benzene. In contrast, the pure Co 3 O 4 sensor did not show remarkable selectivity toward any specific gas. The response and selectivity to methylbenzenes and ethanol could be systematically controlled by selecting the catalytic overlayer material, varying the overlayer thickness, and tuning the sensing temperature. The significant enhancement of the selectivity for xylene and toluene was attributed to the reforming of less reactive methylbenzenes into more reactive and smaller species and oxidative filtering of other interference gases, including ubiquitous ethanol. The concurrent control of the gas reforming and oxidative filtering processes using a nanoscale overlayer of catalytic oxides provides a new, general, and powerful tool for designing highly selective and sensitive oxide semiconductor gas sensors.

  10. Assessment of Potential Location of High Arsenic Contamination Using Fuzzy Overlay and Spatial Anisotropy Approach in Iron Mine Surrounding Area

    PubMed Central

    Wirojanagud, Wanpen; Srisatit, Thares

    2014-01-01

    Fuzzy overlay approach on three raster maps including land slope, soil type, and distance to stream can be used to identify the most potential locations of high arsenic contamination in soils. Verification of high arsenic contamination was made by collection samples and analysis of arsenic content and interpolation surface by spatial anisotropic method. A total of 51 soil samples were collected at the potential contaminated location clarified by fuzzy overlay approach. At each location, soil samples were taken at the depth of 0.00-1.00 m from the surface ground level. Interpolation surface of the analysed arsenic content using spatial anisotropic would verify the potential arsenic contamination location obtained from fuzzy overlay outputs. Both outputs of the spatial surface anisotropic and the fuzzy overlay mapping were significantly spatially conformed. Three contaminated areas with arsenic concentrations of 7.19 ± 2.86, 6.60 ± 3.04, and 4.90 ± 2.67 mg/kg exceeded the arsenic content of 3.9 mg/kg, the maximum concentration level (MCL) for agricultural soils as designated by Office of National Environment Board of Thailand. It is concluded that fuzzy overlay mapping could be employed for identification of potential contamination area with the verification by surface anisotropic approach including intensive sampling and analysis of the substances of interest. PMID:25110751

  11. Real-time self-calibration of a tracked augmented reality display

    NASA Astrophysics Data System (ADS)

    Baum, Zachary; Lasso, Andras; Ungi, Tamas; Fichtinger, Gabor

    2016-03-01

    PURPOSE: Augmented reality systems have been proposed for image-guided needle interventions but they have not become widely used in clinical practice due to restrictions such as limited portability, low display refresh rates, and tedious calibration procedures. We propose a handheld tablet-based self-calibrating image overlay system. METHODS: A modular handheld augmented reality viewbox was constructed from a tablet computer and a semi-transparent mirror. A consistent and precise self-calibration method, without the use of any temporary markers, was designed to achieve an accurate calibration of the system. Markers attached to the viewbox and patient are simultaneously tracked using an optical pose tracker to report the position of the patient with respect to a displayed image plane that is visualized in real-time. The software was built using the open-source 3D Slicer application platform's SlicerIGT extension and the PLUS toolkit. RESULTS: The accuracy of the image overlay with image-guided needle interventions yielded a mean absolute position error of 0.99 mm (95th percentile 1.93 mm) in-plane of the overlay and a mean absolute position error of 0.61 mm (95th percentile 1.19 mm) out-of-plane. This accuracy is clinically acceptable for tool guidance during various procedures, such as musculoskeletal injections. CONCLUSION: A self-calibration method was developed and evaluated for a tracked augmented reality display. The results show potential for the use of handheld image overlays in clinical studies with image-guided needle interventions.

  12. Hand forces exerted by long-term care staff when pushing wheelchairs on compliant and non-compliant flooring.

    PubMed

    Lachance, Chantelle C; Korall, Alexandra M B; Russell, Colin M; Feldman, Fabio; Robinovitch, Stephen N; Mackey, Dawn C

    2018-09-01

    Purpose-designed compliant flooring and carpeting have been promoted as a means for reducing fall-related injuries in high-risk environments, such as long-term care. However, it is not known whether these surfaces influence the forces that long-term care staff exert when pushing residents in wheelchairs. We studied 14 direct-care staff who pushed a loaded wheelchair instrumented with a triaxial load cell to test the effects on hand force of flooring overlay (vinyl versus carpet) and flooring subfloor (concrete versus compliant rubber [brand: SmartCells]). During straight-line pushing, carpet overlay increased initial and sustained hand forces compared to vinyl overlay by 22-49% over a concrete subfloor and by 8-20% over a compliant subfloor. Compliant subflooring increased initial and sustained hand forces compared to concrete subflooring by 18-31% when under a vinyl overlay. In contrast, compliant flooring caused no change in initial or sustained hand forces compared to concrete subflooring when under a carpet overlay. Copyright © 2018 Elsevier Ltd. All rights reserved.

  13. Evaluation of iron aluminide weld overlays for erosion - corrosion resistant boiler tube coatings in low NO{sub x} boilers

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    DuPont, J.N.; Banovic, S.W.; Marder, A.R.

    1996-08-01

    Low NOx burners are being installed in many fossil fired power plants in order to comply with new Clean Air Regulations. Due to the operating characteristics of these burners, boiler tube sulfidation corrosion is often enhanced and premature tube failures can occur. Failures due to oxidation and solid particle erosion are also a concern. A program was initiated in early 1996 to evaluate the use of iron aluminide weld overlays for erosion/corrosion protection of boiler tubes in Low NOx boilers. Composite iron/aluminum wires will be used with the Gas Metal Arc Welding (GMAW) process to prepare overlays on boiler tubesmore » steels with aluminum contents from 8 to 16wt%. The weldability of the composite wires will be evaluated as a function of chemical composition and welding parameters. The effect of overlay composition on corrosion (oxidation and sulfidation) and solid particle erosion will also be evaluated. The laboratory studies will be complemented by field exposures of both iron aluminide weld overlays and co-extruded tubing under actual boiler conditions.« less

  14. Evaluation and comparison of ERTS measurements of major crops and soil associations for selected sites in the central United States

    NASA Technical Reports Server (NTRS)

    Baumgardner, M. F. (Principal Investigator)

    1973-01-01

    The author has identified the following significant results. The most significant result was the use of the temporal overlay technique where the computer was used to overlay ERTS-1 data from three different dates (9 Oct., 14 Nov., 2 Dec.). The registration of MSS digital data from different dates was estimated to be accurate within one half resolution element. The temporal overlay capability provides a significant advance in machine-processing of MSS data. It is no longer essential to go through the tedious exercise of locating ground observation sites on the digital data from each ERTS-1 overpass. Once the address of a ground observation site has been located on a digital tape from any ERTS-1 overpass, the overlay technique can be used to locate the same address on a digital tape of MSS data from any other ERTS-1 pass over the same area. The temporal overlay technique also adds a valuable dimension for identifying and mapping changes in vegetation, water, and other dynamic surface features.

  15. Occlusal force discrimination by denture patients.

    PubMed

    Pacer, R J; Bowman, D C

    1975-06-01

    A study was conducted on subjects with conventional dentures and with overlay dentures to compare their abilities to discriminate between occlusal forces. Perpendicular forces were applied to the dynamic center of the occlusal table of the mandibular denture. Each subject's ability to distinguish differences in values of force was observed and recorded. All subjects with dentures showed sensory threshold values close to those reported for natural teeth. A graphic plotting showed that the responses of subjects with overlay-type dentures were more closely correlated with the psychophysical law as expressed by Stevens as a power function. Since this phenomenon holds true for natural teeth, the overlay denture more closely resembles natural teeth in this type of sensory function than does the conventional denture. In addition to recognized advantages, such as preservation of the ridge and improved retention and stability, the overlay denture provides more typical sensory function than is provided by the conventional denture. This advantage should further motivate dentists and patients to consider the retention and utilization of at least two suitable teeth in an overlay-type denture service.

  16. A mechanistic-empirical approach for evaluating the effect of diamond grinding and thin overlay on predicted pavement performance.

    DOT National Transportation Integrated Search

    2016-04-01

    Advancements in pavement management practice require evaluating the performance of pavement preservation treatments using performance-related characteristics. However, state highway agencies face the challenge of developing performance-based relation...

  17. Crack and seat concrete pavement

    DOT National Transportation Integrated Search

    1987-09-01

    Prevention of reflective cracking in HMAC overlays placed over PCCP has been based on experience gained from trial and error methods of in-service pavements in many states. Arizona recently utilized this technique on a PCCP section of Interstate 40 b...

  18. Rubblization and base overlay of FM 912 and FM 1155.

    DOT National Transportation Integrated Search

    2010-01-01

    In many instances rubblization may be a good option to convert a deteriorated concrete pavement into a : flexible pavement structure. In this project, the Texas Department of Transportation conducted rubblization : on portions of a concrete pavement ...

  19. Characterizing the Global Impact of P2P Overlays on the AS-Level Underlay

    NASA Astrophysics Data System (ADS)

    Rasti, Amir Hassan; Rejaie, Reza; Willinger, Walter

    This paper examines the problem of characterizing and assessing the global impact of the load imposed by a Peer-to-Peer (P2P) overlay on the AS-level underlay. In particular, we capture Gnutella snapshots for four consecutive years, obtain the corresponding AS-level topology snapshots of the Internet and infer the AS-paths associated with each overlay connection. Assuming a simple model of overlay traffic, we analyze the observed load imposed by these Gnutella snapshots on the AS-level underlay using metrics that characterize the load seen on individual AS-paths and by the transit ASes, illustrate the churn among the top transit ASes during this 4-year period, and describe the propagation of traffic within the AS-level hierarchy.

  20. Proteins detection by polymer optical fibers sensitised with overlayers of block and random copolymers

    NASA Astrophysics Data System (ADS)

    El Sachat, Alexandros; Meristoudi, Anastasia; Markos, Christos; Pispas, Stergios; Riziotis, Christos

    2014-03-01

    A low cost and low complexity optical detection method of proteins is presented by employing a detection scheme based on electrostatic interactions, and implemented by sensitization of a polymer optical fibers' (POF) surface by thin overlayers of properly designed sensitive copolymer materials with predesigned charges. This method enables the fast detection of proteins having opposite charge to the overlayer, and also the effective discrimination of differently charged proteins like lysozyme (LYS) and bovine serum albumin (BSA). As sensitive materials the block and the random copolymers of the same monomers were employed, namely the block copolymer poly(styrene-b-2vinylpyridine) (PS-b- P2VP) and the corresponding random copolymer poly(styrene-r-2vinylpyridine) (PS-r-P2VP), of similar composition and molecular weights. Results show systematically different response between the block and the random copolymers, although of the same order of magnitude, drawing thus important conclusions on their applications' techno-economic aspects given that they have significantly different associated manufacturing method and costs. The use of the POF platform, in combination with those adaptable copolymer sensing materials could lead to efficient low cost bio-detection schemes.

  1. Registration performance on EUV masks using high-resolution registration metrology

    NASA Astrophysics Data System (ADS)

    Steinert, Steffen; Solowan, Hans-Michael; Park, Jinback; Han, Hakseung; Beyer, Dirk; Scherübl, Thomas

    2016-10-01

    Next-generation lithography based on EUV continues to move forward to high-volume manufacturing. Given the technical challenges and the throughput concerns a hybrid approach with 193 nm immersion lithography is expected, at least in the initial state. Due to the increasing complexity at smaller nodes a multitude of different masks, both DUV (193 nm) and EUV (13.5 nm) reticles, will then be required in the lithography process-flow. The individual registration of each mask and the resulting overlay error are of crucial importance in order to ensure proper functionality of the chips. While registration and overlay metrology on DUV masks has been the standard for decades, this has yet to be demonstrated on EUV masks. Past generations of mask registration tools were not necessarily limited in their tool stability, but in their resolution capabilities. The scope of this work is an image placement investigation of high-end EUV masks together with a registration and resolution performance qualification. For this we employ a new generation registration metrology system embedded in a production environment for full-spec EUV masks. This paper presents excellent registration performance not only on standard overlay markers but also on more sophisticated e-beam calibration patterns.

  2. Comparative stress distribution of implant-retained mandibular ball-supported and bar-supported overlay dentures: a finite element analysis.

    PubMed

    Vafaei, Fariborz; Khoshhal, Masoumeh; Bayat-Movahed, Saeed; Ahangary, Ahmad Hassan; Firooz, Farnaz; Izady, Alireza; Rakhshan, Vahid

    2011-08-01

    Implant-retained mandibular ball-supported and bar-supported overlay dentures are the two most common treatment options for the edentulous mandible. The superior option in terms of strain distribution should be determined. The three-dimensional model of mandible (based on computerized tomography scan) and its overlying implant-retained bar-supported and ball-supported overlay dentures were simulated using SolidWorks, NURBS, and ANSYS Workbench. Loads A (60 N) and B (60 N) were exerted, respectively, in protrusive and laterotrusive motions, on second molar mesial, first molar mesial, and first premolar. The strain distribution patterns were assessed on (1) implant tissue, (2) first implant-bone, and (3) second implant-bone interfaces. Protrusive: Strain was mostly detected in the apical of the fixtures and least in the cervical when bar design was used. On the nonworking side, however, strain was higher in the cervical and lower in the apical compared with the working side implant. Laterotrusive: The strain values were closely similar in the two designs. It seems that both designs are acceptable in terms of stress distribution, although a superior pattern is associated with the application of bar design in protrusive motion.

  3. Complete Overlay Denture for Pedodontic Patient with Severe Dentinogenesis Imperfecta

    PubMed Central

    Joseph, Elizabeth; Rupesh, Suresh; Mathew, Josey

    2017-01-01

    Dentinogenesis imperfecta (DI) is a hereditary condition that may affect both primary and permanent dentition and is characterized by abnormal dentin formation. The teeth may be discolored with chipping of enamel and, in untreated cases, the entire dentition may wear off to the gingiva. This may lead to the formation of abscesses, tooth mobility, and early loss of teeth. In the Indian population, DI is found to have an incidence of 0.09%. Treatment of DI should aim to remove infection, if any, from the oral cavity; restore form, function, and esthetics; and protect posterior teeth from wear for maintaining the occlusal vertical dimension. Treatment strategies should be selected based on the presenting complaint of the patient, patient’s age, and severity of the problem. This case report presents the management of severe DI with tooth worn off until gingival level in a very young patient using complete overlay denture, which has not been reported earlier. How to cite this article: Syriac G, Joseph E, Rupesh S, Mathew J. Complete Overlay Denture for Pedodontic Patient with Severe Dentinogenesis Imperfecta. Int J Clin Pediatr Dent 2017;10(4):394-398. PMID:29403236

  4. Highly reflective Ag-Cu alloy-based ohmic contact on p-type GaN using Ru overlayer.

    PubMed

    Son, Jun Ho; Jung, Gwan Ho; Lee, Jong-Lam

    2008-12-15

    We report on a metallization scheme of high reflectance, low resistance, and smooth surface morphology ohmic contact on p-type GaN. Ag-Cu alloy/Ru contact showed low contact resistivity as low as 6.2 x 10(-6) Ohms cm(2) and high reflectance of 91% at 460 nm after annealing at 400 degrees C in air ambient. The oxidation annealing promoted the out-diffusion of Ga atoms to dissolve in an Ag-Cu layer with the formation of an Ag-Ga solid solution, lowering the contact resistivity. The Ru overlayer acts as a diffusion barrier for excessive oxygen incorporation during oxidation annealing, resulting in high reflectance, good thermal stability, and smooth surface quality of the contact.

  5. The use of natural teeth in overlay dentures.

    PubMed

    Frantz, W R

    1975-08-01

    A method has been described for the construction of tooth-supported dentures where the natural tooth was utilized and the acrylic resin for the denture base processed directly to the prepared cast. Based on the 112 dentures that were made, this technique is economical, provides support and stabilization, and has full patient acceptance.

  6. Integration of (208) oriented epitaxial Hf-doped Bi4Ti3O12 with (0002) GaN using SrTiO3/TiO2 buffer layer

    NASA Astrophysics Data System (ADS)

    Luo, W. B.; Zhu, J.; Li, Y. R.; Wang, X. P.; Zhang, Y.

    2009-05-01

    Hf-doped Bi4Ti3O12 (BTH) ferroelectric films with excellent electrical properties were epitaxially integrated with GaN semiconductor using (111) SrTiO3 (STO)/rutile (200) TiO2 as buffer layer. The STO/TiO2 buffer layer was deposited by laser molecular beam epitaxy. The structural characteristics of the buffer layer were in situ and ex situ characterized by reflective high energy electron diffraction, x-ray diffraction (XRD), and high resolution transmission microscopy. The overlaying SrRuO3 (SRO) and BTH films were then deposited by pulsed laser deposition. XRD spectra, including θ-2θ and Φ scans, show that the (208) BTH films were epitaxially grown on GaN, and the BTH films inherit the in-plane twin-domain of STO buffer layer. Electrical measurements demonstrate that the non-c axis BTH films possess a large remnant polarization (2Pr=45 μC/cm2), excellent fatigue endurance (10.2% degradation after 1.1×1010 switching cycles), and a low leakage current density (1.94×10-7 A/cm2 at an electric field of 200 kV/cm). These results reveal that the (208) BTH films with favorable electrical performance could be epitaxially grown on GaN template using STO/TiO2 buffer layer.

  7. Integrated scatterometry for tight overlay and CD control to enable 20-nm node wafer manufacturing.

    NASA Astrophysics Data System (ADS)

    Benschop, Jos; Engelen, Andre; Cramer, Hugo; Kubis, Michael; Hinnen, Paul; van der Laan, Hans; Bhattacharyya, Kaustuve; Mulkens, Jan

    2013-04-01

    The overlay, CDU and focus requirements for the 20nm node can only be met using a holistic lithography approach whereby full use is made of high-order, field-by-field, scanner correction capabilities. An essential element in this approach is a fast, precise and accurate in-line metrology sensor, capable to measure on product. The capabilities of the metrology sensor as well as the impact on overlay, CD and focus will be shared in this paper.

  8. Mechanistic flexible pavement overlay design program.

    DOT National Transportation Integrated Search

    2009-07-01

    The current Louisiana Department of Transportation and Development (LADOTD) overlay thickness design method follows the Component : Analysis procedure provided in the 1993 AASHTO pavement design guide. Since neither field nor laboratory tests a...

  9. Thin Bonded Concrete Overlay and Bonding Agents

    DOT National Transportation Integrated Search

    1996-06-01

    This report presents the construction procedures and initial performance evaluation of a four-inch Bonded Concrete Overlay placed on Interstate 80 near Moline, Illinois. Preconstruction testing consisted of Falling Weight Deflectometer, permeability ...

  10. The Performance Evaluation of Single Pass Thin Lift Bituminous Overlays

    DOT National Transportation Integrated Search

    1992-06-01

    In the mid-1980s, the Illinois Department of Transportation (IDOT) found itself challenged to maintain an aging highway network at an acceptable level of service on a limited financial base. This made programming rehabilitations for the rural highway...

  11. Assessment of asphalt interlayer designed on jointed concrete : [tech transfer summary].

    DOT National Transportation Integrated Search

    2014-11-01

    Based on the substantial reduction in reflective cracking and only marginal : cost increases from using the interlayer on this research project, it is : recommended that future hot mix asphalt (HMA) overlay projects in Iowa : consider using the crack...

  12. Improving concrete overlay construction.

    DOT National Transportation Integrated Search

    2010-03-01

    Several road construction projects involving concrete overlays at the state and county levels in Iowa in 2009 were studied for : construction techniques and methods. The projects that were evaluated consisted of sites in four Iowa counties: Osceola, ...

  13. Longer Lasting Bridge Deck Overlays

    DOT National Transportation Integrated Search

    2018-04-01

    The objective of this report is to determine the most effective method for bridge deck overlay construction and repair by assessing current practices; examining new products and technologies; and reviewing NCHRP (National Cooperative Highway Research...

  14. Automated sub-5 nm image registration in integrated correlative fluorescence and electron microscopy using cathodoluminescence pointers

    NASA Astrophysics Data System (ADS)

    Haring, Martijn T.; Liv, Nalan; Zonnevylle, A. Christiaan; Narvaez, Angela C.; Voortman, Lenard M.; Kruit, Pieter; Hoogenboom, Jacob P.

    2017-03-01

    In the biological sciences, data from fluorescence and electron microscopy is correlated to allow fluorescence biomolecule identification within the cellular ultrastructure and/or ultrastructural analysis following live-cell imaging. High-accuracy (sub-100 nm) image overlay requires the addition of fiducial markers, which makes overlay accuracy dependent on the number of fiducials present in the region of interest. Here, we report an automated method for light-electron image overlay at high accuracy, i.e. below 5 nm. Our method relies on direct visualization of the electron beam position in the fluorescence detection channel using cathodoluminescence pointers. We show that image overlay using cathodoluminescence pointers corrects for image distortions, is independent of user interpretation, and does not require fiducials, allowing image correlation with molecular precision anywhere on a sample.

  15. Automated sub-5 nm image registration in integrated correlative fluorescence and electron microscopy using cathodoluminescence pointers.

    PubMed

    Haring, Martijn T; Liv, Nalan; Zonnevylle, A Christiaan; Narvaez, Angela C; Voortman, Lenard M; Kruit, Pieter; Hoogenboom, Jacob P

    2017-03-02

    In the biological sciences, data from fluorescence and electron microscopy is correlated to allow fluorescence biomolecule identification within the cellular ultrastructure and/or ultrastructural analysis following live-cell imaging. High-accuracy (sub-100 nm) image overlay requires the addition of fiducial markers, which makes overlay accuracy dependent on the number of fiducials present in the region of interest. Here, we report an automated method for light-electron image overlay at high accuracy, i.e. below 5 nm. Our method relies on direct visualization of the electron beam position in the fluorescence detection channel using cathodoluminescence pointers. We show that image overlay using cathodoluminescence pointers corrects for image distortions, is independent of user interpretation, and does not require fiducials, allowing image correlation with molecular precision anywhere on a sample.

  16. Automated sub-5 nm image registration in integrated correlative fluorescence and electron microscopy using cathodoluminescence pointers

    PubMed Central

    Haring, Martijn T.; Liv, Nalan; Zonnevylle, A. Christiaan; Narvaez, Angela C.; Voortman, Lenard M.; Kruit, Pieter; Hoogenboom, Jacob P.

    2017-01-01

    In the biological sciences, data from fluorescence and electron microscopy is correlated to allow fluorescence biomolecule identification within the cellular ultrastructure and/or ultrastructural analysis following live-cell imaging. High-accuracy (sub-100 nm) image overlay requires the addition of fiducial markers, which makes overlay accuracy dependent on the number of fiducials present in the region of interest. Here, we report an automated method for light-electron image overlay at high accuracy, i.e. below 5 nm. Our method relies on direct visualization of the electron beam position in the fluorescence detection channel using cathodoluminescence pointers. We show that image overlay using cathodoluminescence pointers corrects for image distortions, is independent of user interpretation, and does not require fiducials, allowing image correlation with molecular precision anywhere on a sample. PMID:28252673

  17. Structural analyses of a rigid pavement overlaying a sub-surface void

    NASA Astrophysics Data System (ADS)

    Adam, Fatih Alperen

    Pavement failures are very hazardous for public safety and serviceability. These failures in pavements are mainly caused by subsurface voids, cracks, and undulation at the slab-base interface. On the other hand, current structural analysis procedures for rigid pavement assume that the slab-base interface is perfectly planar and no imperfections exist in the sub-surface soil. This assumption would be violated if severe erosion were to occur due to inadequate drainage, thermal movements, and/or mechanical loading. Until now, the effect of erosion was only considered in the faulting performance model, but not with regards to transverse cracking at the mid-slab edge. In this research, the bottom up fatigue cracking potential, caused by the combined effects of wheel loading and a localized imperfection in the form of a void below the mid-slab edge, is studied. A robust stress and surface deflection analysis was also conducted to evaluate the influence of a sub-surface void on layer moduli back-calculation. Rehabilitative measures were considered, which included a study on overlay and fill remediation. A series regression of equations was proposed that provides a relationship between void size, layer moduli stiffness, and the overlay thickness required to reduce the stress to its original pre-void level. The effect of the void on 3D pavement crack propagation was also studied under a single axle load. The amplifications to the stress intensity was shown to be high but could be mitigated substantially if stiff material is used to fill the void and impede crack growth. The pavement system was modeled using the commercial finite element modeling program Abaqus RTM. More than 10,000 runs were executed to do the following analysis: stress analysis of subsurface voids, E-moduli back-calculation of base layer, pavement damage calculations of Beaumont, TX, overlay thickness estimations, and mode I crack analysis. The results indicate that the stress and stress intensity are, on average, amplified considerably: 80% and 150%, respectively, by the presence of the void and more severe in a bonded pavement system compared to an un-bonded system. The sub-surface void also significantly affects the layer moduli back-calculation. The equivalent moduli of the layers are reduced considerably when a sub-surface void is present. However, the results indicate the back-calculated moduli derived using surface deflection, and longitudinal stress basins did not yield equivalent layer moduli under mechanical loading; the back-calculated deflection-based moduli were larger than the stress-based moduli, leading to stress calculations that were lower than those found in the real system.

  18. "Performance Of A Wafer Stepper With Automatic Intra-Die Registration Correction."

    NASA Astrophysics Data System (ADS)

    van den Brink, M. A.; Wittekoek, S.; Linders, H. F. D.; van Hout, F. J.; George, R. A.

    1987-01-01

    An evaluation of a wafer stepper with the new improved Philips/ASM-L phase grating alignment system is reported. It is shown that an accurate alignment system needs an accurate X-Y-0 wafer stage and an accurate reticle Z stage to realize optimum overlay accuracy. This follows from a discussion of the overlay budget and an alignment procedure model. The accurate wafer stage permits high overlay accuracy using global alignment only, thus eliminating the throughput penalty of align-by-field schemes. The accurate reticle Z stage enables an intra-die magnification control with respect to the wafer scale. Various overlay data are reported, which have been measured with the automatic metrology program of the stepper. It is demonstrated that the new dual alignment system (with the external spatial filter) has improved the ability to align to weakly reflecting layers. The results are supported by a Fourier analysis of the alignment signal. Resolution data are given for the PAS 2500 projection lenses, which show that the high overlay accuracy of the system is properly matched with submicron linewidth control. The results of a recently introduced 20mm i-line lens with a numerical aperture of 0.4 (Zeiss 10-78-58) are included.

  19. Latex-modified concrete overlay containing Type K cement.

    DOT National Transportation Integrated Search

    2005-01-01

    Hydraulic cement concrete overlays are usually placed on bridges to reduce the infiltration of water and chloride ions and to improve skid resistance, ride quality, and surface appearance. Constructed in accordance with prescription specifications, s...

  20. Utilizing Lab Tests to Predict Asphalt Concrete Overlay Performance

    DOT National Transportation Integrated Search

    2017-12-01

    A series of five experimental projects and three demonstration projects were constructed to better understand the performance of pavement overlays using various levels of asphalt binder replacement (ABR) from reclaimed asphalt pavement (RAP), recycle...

  1. Bituminous concrete overlay studies.

    DOT National Transportation Integrated Search

    1971-01-01

    Deflection tests conducted on eight sections of primary highway, both before and after asphaltic concrete resurfacings, were analyzed as a study of the utility of such tests in the design of overlays. The application of tentative traffic and allowabl...

  2. Evaluation of E-Krete for rut filling.

    DOT National Transportation Integrated Search

    2003-03-01

    Wheel path rutting in asphalt pavements presents a serious problem for highway agencies : worldwide. There are several ways to rehabilitate rutted asphalt pavements, including milling by : itself, milling and overlay, overlay without milling, and rut...

  3. Effectiveness of two reflection crack attenuation techniques.

    DOT National Transportation Integrated Search

    2015-09-01

    Asphalt overlays are one of the most common tools for rehabilitating existing asphalt and concrete pavements. : However, the performance of new overlays is often jeopardized by the cracking distress in the existing : pavement. This existing cracking ...

  4. Measuring, Achieving, And Promoting Smoothness Of Virginia's Asphalt Overlays

    DOT National Transportation Integrated Search

    1999-04-01

    This study was initiated with the goal of identifying the predominant factors affecting the achievable smoothness of asphalt overlays. In addition, the researcher chronicles the evolution of Virginia's innovative special provision for smoothness, whi...

  5. Software Engineering Laboratory (SEL) Data Base Maintenance System (DBAM) user's guide and system description

    NASA Technical Reports Server (NTRS)

    Lo, P. S.; Card, D.

    1983-01-01

    The Software Engineering Laboratory (SEL) Data Base Maintenance System (DBAM) is explained. The various software facilities of the SEL, DBAM operating procedures, and DBAM system information are described. The relationships among DBAM components (baseline diagrams), component descriptions, overlay descriptions, indirect command file listings, file definitions, and sample data collection forms are provided.

  6. 75 FR 66404 - Self-Regulatory Organizations; C2 Options Exchange, Incorporated; Notice of Filing and Immediate...

    Federal Register 2010, 2011, 2012, 2013, 2014

    2010-10-28

    ... Change The Exchange proposes to modify the wording of Rule 6.12 relating to the C2 matching algorithm... matching algorithm and subsequently overlay certain priorities over the selected base algorithm. There are currently two base algorithms: price-time (often referred to as first in, first out or FIFO) in which...

  7. Reflective Cracking of Flexible Pavements Phase I and II Final Recommendations

    DOT National Transportation Integrated Search

    2008-02-02

    This report summarizes all the findings and recommendations from the Phase I and Phase II of the Nevada Department of Transportation (NDOT) study initiated in 2006 to mitigate reflective cracking in hot mix asphalt (HMA) overlays. Based on the analys...

  8. The use of fabric reinforced overlays to control reflection cracking of composite pavements.

    DOT National Transportation Integrated Search

    1973-01-01

    Fabric reinforcement was used in an attempt to prevent reflection cracking of two bituminous concrete layers overlying an 8-inch plain (unreinforced, unjointed) concrete base that was underlain by a portland cement stabilized subbase material. On the...

  9. The incorporation of plotting capability into the Unified Subsonic Supersonic Aerodynamic Analysis program, version B

    NASA Technical Reports Server (NTRS)

    Winter, O. A.

    1980-01-01

    The B01 version of the United Subsonic Supersonic Aerodynamic Analysis program is the result of numerous modifications and additions made to the B00 version. These modifications and additions affect the program input, its computational options, the code readability, and the overlay structure. The following are described: (1) the revised input; (2) the plotting overlay programs which were also modified, and their associated subroutines, (3) the auxillary files used by the program, the revised output data; and (4) the program overlay structure.

  10. Self-aligned blocking integration demonstration for critical sub-40nm pitch Mx level patterning

    NASA Astrophysics Data System (ADS)

    Raley, Angélique; Mohanty, Nihar; Sun, Xinghua; Farrell, Richard A.; Smith, Jeffrey T.; Ko, Akiteru; Metz, Andrew W.; Biolsi, Peter; Devilliers, Anton

    2017-04-01

    Multipatterning has enabled continued scaling of chip technology at the 28nm node and beyond. Selfaligned double patterning (SADP) and self-aligned quadruple patterning (SAQP) as well as Litho- Etch/Litho-Etch (LELE) iterations are widely used in the semiconductor industry to enable patterning at sub 193 immersion lithography resolutions for layers such as FIN, Gate and critical Metal lines. Multipatterning requires the use of multiple masks which is costly and increases process complexity as well as edge placement error variation driven mostly by overlay. To mitigate the strict overlay requirements for advanced technology nodes (7nm and below), a self-aligned blocking integration is desirable. This integration trades off the overlay requirement for an etch selectivity requirement and enables the cut mask overlay tolerance to be relaxed from half pitch to three times half pitch. Selfalignement has become the latest trend to enable scaling and self-aligned integrations are being pursued and investigated for various critical layers such as contact, via, metal patterning. In this paper we propose and demonstrate a low cost flexible self-aligned blocking strategy for critical metal layer patterning for 7nm and beyond from mask assembly to low -K dielectric etch. The integration is based on a 40nm pitch SADP flow with 2 cut masks compatible with either cut or block integration and employs dielectric films widely used in the back end of the line. As a consequence this approach is compatible with traditional etch, deposition and cleans tools that are optimized for dielectric etches. We will review the critical steps and selectivities required to enable this integration along with bench-marking of each integration option (cut vs. block).

  11. Considerations for Software Defined Networking (SDN): Approaches and use cases

    NASA Astrophysics Data System (ADS)

    Bakshi, K.

    Software Defined Networking (SDN) is an evolutionary approach to network design and functionality based on the ability to programmatically modify the behavior of network devices. SDN uses user-customizable and configurable software that's independent of hardware to enable networked systems to expand data flow control. SDN is in large part about understanding and managing a network as a unified abstraction. It will make networks more flexible, dynamic, and cost-efficient, while greatly simplifying operational complexity. And this advanced solution provides several benefits including network and service customizability, configurability, improved operations, and increased performance. There are several approaches to SDN and its practical implementation. Among them, two have risen to prominence with differences in pedigree and implementation. This paper's main focus will be to define, review, and evaluate salient approaches and use cases of the OpenFlow and Virtual Network Overlay approaches to SDN. OpenFlow is a communication protocol that gives access to the forwarding plane of a network's switches and routers. The Virtual Network Overlay relies on a completely virtualized network infrastructure and services to abstract the underlying physical network, which allows the overlay to be mobile to other physical networks. This is an important requirement for cloud computing, where applications and associated network services are migrated to cloud service providers and remote data centers on the fly as resource demands dictate. The paper will discuss how and where SDN can be applied and implemented, including research and academia, virtual multitenant data center, and cloud computing applications. Specific attention will be given to the cloud computing use case, where automated provisioning and programmable overlay for scalable multi-tenancy is leveraged via the SDN approach.

  12. Lubricating Properties of Ceramic-Bonded Calcium Fluoride Coatings on Nickel-Base Alloys from 75 to 1900 deg F

    NASA Technical Reports Server (NTRS)

    Sliney, Harold E.

    1962-01-01

    The endurance life and the friction coefficient of ceramic-bonded calcium fluoride (CaF2) coatings on nickel-base alloys were determined at temperatures from 75 F to 1900 F. The specimen configuration consisted of a hemispherical rider (3/16-in. rad.) sliding against the flat surface of a rotating disk. Increasing the ambient temperature (up to 1500 F) or the sliding velocity generally reduced the friction coefficient and improved coating life. Base-metal selection was critical above 1500 F. For instance, cast Inconel sliding against coated Inconel X was lubricated effectively to 1500 F, but at 1600 F severe blistering of the coatings occurred. However, good lubrication and adherence were obtained for Rene 41 sliding against coated Rene 41 at temperatures up to 1900 F; no blisters developed, coating wear life was fairly good, and the rider wear rate was significantly lower than for the unlubricated metals. Friction coefficients were 0.12 at 1500 F, 0.15 at 1700 F, and 0.17 at 1800 F and 1900 F. Because of its ready availability, Inconel X appears to be the preferred substrate alloy for applications in which the temperature does not exceed 1500 F. Rene 41 would have to be used in applications involving higher temperatures. Improved coating life was derived by either preoxidizing the substrate metals prior to the coating application or by applying a very thin (less than 0.0002 in.) burnished and sintered overlay to the surface of the coating. Preoxidation did not affect the friction coefficient. The overlay generally resulted in a higher friction coefficient than that obtained without the overlay. The combination of both modifications resulted in longer coating life and in friction coefficients intermediate between those obtained with either modification alone.

  13. GIS-based multicriteria overlay analysis in soil-suitability evaluation for cotton (Gossypium spp.): A case study in the black soil region of Central India

    NASA Astrophysics Data System (ADS)

    Walke, N.; Obi Reddy, G. P.; Maji, A. K.; Thayalan, S.

    2012-04-01

    In this study an attempt was made to characterize the soils of the Ringanbodi watershed, Nagpur district, Maharashtra, Central India, for soil-suitability evaluation for cotton using geographic information system (GIS)-based multicriteria overlay analysis techniques. The study shows that 8 soil series and 16 soil series associations in the study area and soils were classified into three orders, i.e., Entisol, Inceptisol, and Vertisol. The analysis reveals that the soil associations E-F, F-G, G-H, and H-G are "moderately suitable" (S2), D-E are "marginally to moderately suitable," and C-D are marginally (S3) suitable. However, soils B-C are "not suitable" to "marginally suitable" (N2-S3) and A-B are "unsuitable" (N2) for cultivation of cotton. The area analysis shows that for a cotton crop an area about 966.7 ha (49.1%) of TGA is moderately suitable and classified as S2. An area about 469.9 ha (23.8%) of TGA is marginal to moderately suitable (S3-S2). The marginally suitable soils for cotton are classified as S3 and cover an area about 35.2 ha (1.8%) of TGA. However, a 172.3 ha (8.7%) area is not suitable (N2) to marginally suitable (S3) and a 326.9 (16.6%) area is not suitable (N2) for cotton because of uncorrectable factors like soil depth, slope, etc. The study demonstrated that GIS-based multicriteria overlay analysis of soil thematic parameters will be of immense help in soil-suitability evaluation for cotton.

  14. Coatings for directional eutectics. [for corrosion and oxidation resistance

    NASA Technical Reports Server (NTRS)

    Felten, E. J.; Strangman, T. E.; Ulion, N. E.

    1974-01-01

    Eleven coating systems based on MCrAlY overlay and diffusion aluminide prototypes were evaluated to determine their capability for protecting the gamma/gamma prime-delta directionally solidified eutectic alloy (Ni-20Cb-6Cr-2.5Al) in gas turbine engine applications. Furnace oxidation and hot corrosion, Mach 0.37 burner-rig, tensile ductility, stress-rupture and thermomechanical fatigue tests were used to evaluate the coated gamma/gamma prime-delta alloy. The diffusion aluminide coatings provided adequate oxidation resistance at 1144 K (1600 F) but offered very limited protection in 114 K (1600 F) hot corrosion and 1366 K (2000 F) oxidation tests. A platinum modified NiCrAlY overlay coating exhibited excellent performance in oxidation testing and had no adverse effects upon the eutectic alloy.

  15. Premixed polymer concrete overlays.

    DOT National Transportation Integrated Search

    1990-01-01

    The results of a study undertaken to evaluate premixed polymer concrete overlays (PMPCO) over a 3-year period are presented. The PMPCO evaluated were constructed with polyester amide para resin and silica sand 1;. polyester styrene resin 1 and silica...

  16. Polymer concrete overlay test program : interim report.

    DOT National Transportation Integrated Search

    1974-11-01

    This report describes work done on various combinations of monomers and polymer concrete mixes and identifies the mixes showing the greatest potential for use in bridge deck overlays . Presented are test results showing physical properties of various...

  17. Iowa task report : US 18 concrete overlay construction under traffic.

    DOT National Transportation Integrated Search

    2012-05-01

    The National Concrete Pavement Technology Center, Iowa Department of Transportation, and Federal Highway Administration set out to demonstrate and document the design and construction of portland cement concrete (PCC) overlays on two-lane roadways wh...

  18. Evaluation of a thin-bonded Portland cement concrete pavement overlay.

    DOT National Transportation Integrated Search

    1996-01-01

    This report discusses the performance of the Virginia Department of Transportation's first modern rehabilitation project involving a thin-bonded portland cement concrete overlay of an existing jointed concrete pavement. The performance of the rigid o...

  19. Research notes : geotextile fabrics under asphalt concrete overlays.

    DOT National Transportation Integrated Search

    1992-12-01

    Last year, the City of Portland decided to place geotextile fabrics under asphalt concrete overlays for pavement reinforcement and crack retardation. The City expected the following benefits from using the fabrics: retardation of reflective cracks, r...

  20. Measuring, achieving and promoting smoothness of Virginia's asphalt overlays.

    DOT National Transportation Integrated Search

    1999-01-01

    This study was initiated with the goal of identifying the predominant factors affecting the achievable smoothness of asphalt overlays. In addition, it chronicles the evolution of Virginia's innovative special provision for smoothness, which was devel...

  1. Stress absorbing membrane innerlayer : final report.

    DOT National Transportation Integrated Search

    1985-04-01

    The westbound lanes of the South Baker Interchange-Encina Interchange Section of I-84 were overlayed in 1977. A stress absorbing membrane innerlayer (SAMI), was included in this overlay as an experimental feature. This report is the final evaluation ...

  2. Performance specification for high performance concrete overlays on bridges.

    DOT National Transportation Integrated Search

    2004-01-01

    Hydraulic cement concrete overlays are usually placed on bridges to reduce the infiltration of water and chloride ions and to improve skid resistance, ride quality, and surface appearance. Constructed in accordance with prescription specifications, s...

  3. Overlay field application program, Pennsylvania US-119.

    DOT National Transportation Integrated Search

    2010-11-01

    The Concrete Overly Filed Application program is administered by FHWA and the National Concrete Pavement Technology Center (CP Tech Center). The overall objective of this program is to increase the awareness and knowledge of concrete overlay applicat...

  4. On the influence of latency estimation on dynamic group communication using overlays

    NASA Astrophysics Data System (ADS)

    Vik, Knut-Helge; Griwodz, Carsten; Halvorsen, Pål

    2009-01-01

    Distributed interactive applications tend to have stringent latency requirements and some may have high bandwidth demands. Many of them have also very dynamic user groups for which all-to-all communication is needed. In online multiplayer games, for example, such groups are determined through region-of-interest management in the application. We have investigated a variety of group management approaches for overlay networks in earlier work and shown that several useful tree heuristics exist. However, these heuristics require full knowledge of all overlay link latencies. Since this is not scalable, we investigate the effects that latency estimation techqniues have ton the quality of overlay tree constructions. We do this by evaluating one example of our group management approaches in Planetlab and examing how latency estimation techqniues influence their quality. Specifically, we investigate how two well-known latency estimation techniques, Vivaldi and Netvigator, affect the quality of tree building.

  5. Single-layer graphdiyne-covered Pt(111) surface: improved catalysis confined under two-dimensional overlayer

    NASA Astrophysics Data System (ADS)

    Chen, Xi; Lin, Zheng-Zhe

    2018-05-01

    In recent years, two-dimensional confined catalysis, i.e., the enhanced catalytic reactions in confined space between metal surface and two-dimensional overlayer, makes a hit and opens up a new way to enhance the performance of catalysts. In this work, graphdiyne overlayer was proposed as a more excellent material than graphene or hexagonal boron nitride for two-dimensional confined catalysis on Pt(111) surface. Density functional theory calculations revealed the superiority of graphdiyne overlayer originates from the steric hindrance effect which increases the catalytic ability and lowers the reaction barriers. Moreover, with the big triangle holes as natural gas tunnels, graphdiyne possesses higher efficiency for the transit of gaseous reactants and products than graphene or hexagonal boron nitride. The results in this work would benefit future development of two-dimensional confined catalysis. [Figure not available: see fulltext.

  6. Study of behaviors of aluminum overlayers deposited on uranium via AES, EELS, and XPS

    NASA Astrophysics Data System (ADS)

    Liu, Kezhao; Luo, Lizhu; Zhou, Wei; Yang, Jiangrong; Xiao, Hong; Hong, Zhanglian; Yang, Hui

    2013-04-01

    Aluminum overlayers on uranium were prepared by sputtering at room temperature in an ultra-high vacuum chamber. The growth mode of aluminum overlayers and behaviors of the Al/U interface reaction were studied in situ by auger electron spectroscopy, electron energy loss spectroscopy, and X-ray photoelectron spectroscopy. The results suggested that the interdiffusion took place at the Al/U interface during the initial stage of deposition. The U4f spectra of the Al/U interface showed strong correlation satellites at binding energies of 380.4 and 392.7 eV and plasma loss features at 404.2 eV, respectively. The interactions between aluminum and uranium yielded the intermetallic compound of UAlx, inducing the shift to a low binding energy for Al2p peaks. The results indicated that aluminum overlayers were formed on the uranium by sputtering in an island growth mode.

  7. Materials physics of half-metallic magnetic oxide films by pulsed laser deposition: Controlling the crystal structure and near-surface properties of strontium iron molybdenum oxide and chromium oxide films

    NASA Astrophysics Data System (ADS)

    Jalili, Helia

    The idea of half-metallic ferromagnets was first introduced by de Groot et al. in 1983 based on their calculations. The density of state at the Fermi level for half-metallic ferromagnet is completely polarized, meaning that only one of the spin up or spin down channel exists and has metallic behaviour while the other spin channel behaves as a semiconductor or insulator. This unusual electronic structure can be seen in different materials including Sr2FeMoO6, CrO2 and Mn-based Heusler alloys. The high spin polarization degree of the half-metallic ferromagnets makes them a perfect candidate to be used as a spin-injector/detector in spin-based electronics device (spintronics). However, the degree of spin polarization of these materials, particularly in the multilayered structure spintronic devices, strongly depends on the surface/interface quality and the presence of defects, which was the subject of the present study. Pulsed laser deposition (PLD) has been used to grow two examples of the half-metallic ferromagnets, namely, Sr2FeMoO6 and CrO2. The effects of the growth conditions (deposition temperature, gas pressure, laser power, target-to-substrate distance, post-annealing) and of the substrate lattice mismatch and thickness evolution have been studied. By optimizing the growth conditions, nanocrystalline Sr2FeMoO6 films have been grown on a Si(100) substrate for the first time. This single-phase Sr 2FeMoO6 film was obtained at a temperature as low as 600°C, and it exhibits a high saturation magnetic moment of 3.4 muB per formula unit at 77 K. By using glancing-incidence X-ray diffraction with different incident beam angles, the crystal structure of the film was sampled as a function of depth. Despite the lack of good lattice matching with the Si substrate, a preferential orientation of the nanocrystals in the film was observed for the as-grown Sr2FeMoO6 films thicker than 60 nm. Furthermore, effects of the deposition temperature on the epitaxial growth of the Sr2FeMoO6 films on MgO(001) have been studied by means of high-resolution X-ray diffraction. The film grown at 800°C was post-annealed in oxygen, producing epitaxial films of SrMoO4 on top of the Sr2FeMoO6 film. The corresponding magnetization data showed that the post-annealing treatment lowered the saturation magnetic moment from 3.4 muB per formula unit (or /f.u.) for the as-grown Sr2FeMoO6 film to 1.4 muB/f.u. after annealing. X-ray photoemission measurements as a function of sputtering time further revealed the presence of SrMoO4 on both the as-grown and annealed films, and their corresponding depth profiles indicated a thicker SrMoO 4 overlayer on the annealed film. The intensity ratios of the 3d features of Mo4+, Mo5+, and Mo6+ for Sr 2FeMoO6 remained unchanged with sputtering depth (after 160 s of sputtering), supporting the conclusion that the observed secondary phase (SrMoO4) was formed predominantly on the surface and not in the sub-grain boundaries of the as-grown Sr2FeMoO6 film. The epitaxial growth evolution of Sr2FeMoO6 films of different thickness on substrates of MgO(001), SrTiO3(100) and LaAlO3(100) have also been studied. For each thickness, surface morphology, grain size, film epitaxy, and crystal quality were determined by atomic force microscopy and X-ray diffraction (o-2theta scan and reciprocal space mapping). For thicker films (˜120 nm), high resolution X-ray diffraction studies revealed that SrMoO4 and other parasitic phases tend to forms on SrTiO3 and LaAlO3 substrates, but not on those grown on MgO substrates. As a second part of the project, single-phase CrO2 nanostructured thin films have been grown for the first time directly on MgO(001) by PLD from a metallic Cr target in an O2 environment. X-ray diffraction shows that these films are strained and consist of CrO2 crystallites with two possible epitaxial relationships to the substrate: either CrO 2(110) or CrO2(200) is parallel to MgO(001). X-ray photoemission further confirms that the films are primarily CrO2 covered with a thin CrO3 overlayer, and indicates its complete synthesis without any residual metallic Cr.

  8. X-ray probe of GaN thin films grown on InGaN compliant substrates

    NASA Astrophysics Data System (ADS)

    Xu, Xiaoqing; Li, Yang; Liu, Jianming; Wei, Hongyuan; Liu, Xianglin; Yang, Shaoyan; Wang, Zhanguo; Wang, Huanhua

    2013-04-01

    GaN thin films grown on InGaN compliant substrates were characterized by several X-ray technologies: X-ray reciprocal space mapping (RSM), grazing incidence X-ray diffraction (GIXRD), and X-ray photoemission spectrum (XPS). Narrow Lorentz broadening and stress free state were observed for GaN grown on InGaN compliant substrate, while mosaic structure and large tensile stress were observed at the presence of residual indium atoms. RSM disclosed the mosaicity, and the GIXRD was conducted to investigate the depth dependences of crystal quality and strain states. XPS depth profile of indium contents indicated that residual indium atoms deteriorated the crystal quality of GaN not only by producing lattice mismatch at the interface of InGaN and GaN but also by diffusing into GaN overlayers. Accordingly, two solutions were proposed to improve the efficiency of self-patterned lateral epitaxial overgrowth method. This research goes a further step in resolving the urgent substrate problem in GaN fabrication.

  9. Spectral focusing of broadband silver electroluminescence in nanoscopic FRET-LEDs

    NASA Astrophysics Data System (ADS)

    Puchert, Robin P.; Steiner, Florian; Plechinger, Gerd; Hofmann, Felix J.; Caspers, Ines; Kirschner, Johanna; Nagler, Philipp; Chernikov, Alexey; Schüller, Christian; Korn, Tobias; Vogelsang, Jan; Bange, Sebastian; Lupton, John M.

    2017-07-01

    Few inventions have shaped the world like the incandescent bulb. Edison used thermal radiation from ohmically heated conductors, but some noble metals also exhibit 'cold' electroluminescence in percolation films, tunnel diodes, electromigrated nanoparticle aggregates, optical antennas or scanning tunnelling microscopy. The origin of this radiation, which is spectrally broad and depends on applied bias, is controversial given the low radiative yields of electronic transitions. Nanoparticle electroluminescence is particularly intriguing because it involves localized surface-plasmon resonances with large dipole moments. Such plasmons enable very efficient non-radiative fluorescence resonance energy transfer (FRET) coupling to proximal resonant dipole transitions. Here, we demonstrate nanoscopic FRET-light-emitting diodes which exploit the opposite process, energy transfer from silver nanoparticles to exfoliated monolayers of transition-metal dichalcogenides. In diffraction-limited hotspots showing pronounced photon bunching, broadband silver electroluminescence is focused into the narrow excitonic resonance of the atomically thin overlayer. Such devices may offer alternatives to conventional nano-light-emitting diodes in on-chip optical interconnects.

  10. Spectral focusing of broadband silver electroluminescence in nanoscopic FRET-LEDs.

    PubMed

    Puchert, Robin P; Steiner, Florian; Plechinger, Gerd; Hofmann, Felix J; Caspers, Ines; Kirschner, Johanna; Nagler, Philipp; Chernikov, Alexey; Schüller, Christian; Korn, Tobias; Vogelsang, Jan; Bange, Sebastian; Lupton, John M

    2017-07-01

    Few inventions have shaped the world like the incandescent bulb. Edison used thermal radiation from ohmically heated conductors, but some noble metals also exhibit 'cold' electroluminescence in percolation films, tunnel diodes, electromigrated nanoparticle aggregates, optical antennas or scanning tunnelling microscopy. The origin of this radiation, which is spectrally broad and depends on applied bias, is controversial given the low radiative yields of electronic transitions. Nanoparticle electroluminescence is particularly intriguing because it involves localized surface-plasmon resonances with large dipole moments. Such plasmons enable very efficient non-radiative fluorescence resonance energy transfer (FRET) coupling to proximal resonant dipole transitions. Here, we demonstrate nanoscopic FRET-light-emitting diodes which exploit the opposite process, energy transfer from silver nanoparticles to exfoliated monolayers of transition-metal dichalcogenides. In diffraction-limited hotspots showing pronounced photon bunching, broadband silver electroluminescence is focused into the narrow excitonic resonance of the atomically thin overlayer. Such devices may offer alternatives to conventional nano-light-emitting diodes in on-chip optical interconnects.

  11. Transition from Reconstruction toward Thin Film on the (110) Surface of Strontium Titanate

    PubMed Central

    2016-01-01

    The surfaces of metal oxides often are reconstructed with a geometry and composition that is considerably different from a simple termination of the bulk. Such structures can also be viewed as ultrathin films, epitaxed on a substrate. Here, the reconstructions of the SrTiO3 (110) surface are studied combining scanning tunneling microscopy (STM), transmission electron diffraction, and X-ray absorption spectroscopy (XAS), and analyzed with density functional theory calculations. Whereas SrTiO3 (110) invariably terminates with an overlayer of titania, with increasing density its structure switches from n × 1 to 2 × n. At the same time the coordination of the Ti atoms changes from a network of corner-sharing tetrahedra to a double layer of edge-shared octahedra with bridging units of octahedrally coordinated strontium. This transition from the n × 1 to 2 × n reconstructions is a transition from a pseudomorphically stabilized tetrahedral network toward an octahedral titania thin film with stress-relief from octahedral strontia units at the surface. PMID:26954064

  12. Structural differences between superconducting and non-superconducting CaCuO2/SrTiO3 interfaces

    NASA Astrophysics Data System (ADS)

    Zarotti, Francesca; Di Castro, Daniele; Felici, Roberto; Balestrino, Giuseppe

    2018-06-01

    A study of the interface structure of superconducting and non-superconducting CaCuO2/SrTiO3 heterostructures grown on NdGaO3(110) substrates is reported. Using the combination of high resolution x-ray reflectivity and surface diffraction, the crystallographic structure of superconducting and non-superconducting samples has been investigated. The analysis has demonstrated the excellent sharpness of the CaCuO2/SrTiO3 interface (roughness smaller than one perovskite unit cell). Furthermore, we were able to discriminate between the superconducting and the non-superconducting phase. In the former case, we found an increase of the spacing between the topmost Ca plane of CaCuO2 block and the first TiO2 plane of the overlaying STO block, relative to the non-superconducting case. These results are in agreement with the model that foresees a strong oxygen incorporation in the interface Ca plane in the superconducting heterostructures.

  13. Longevity of highway pavements in Illinois : 2000 update

    DOT National Transportation Integrated Search

    2002-12-01

    Results of the latest round of pavement longevity studies in Illinois provide updated performance data through 2000 for HMAC, JRCP, : and CRCP new construction as well as AC overlays (first, second, and third overlays) of these original pavements. Th...

  14. Styrene-butadiene latex modifiers for bridge deck overlay concrete.

    DOT National Transportation Integrated Search

    1978-04-01

    Styrene-butadiene (S/B) latex modified concrete overlays are being used to protect : new bridge decks from rapid deicer-borne chloride intrusion and also in bridge : deck rehabilitation efforts. The purposes of this research were to evaluate several ...

  15. Polymer concrete overlay test program : users' manual.

    DOT National Transportation Integrated Search

    1977-12-01

    The purpose of this manual is to provide the reader with sufficient information to successfully place a polyester styrene polymer concrete overlay on a bridge deck. Although the binder is a resin, no detailed knowledge of polymer chemistry is needed ...

  16. Latex and microsilica modified concrete bridge deck overlays in Oregon : interim report.

    DOT National Transportation Integrated Search

    1994-08-01

    This interim report presented information collected from 24 bridge deck overlays constructed in Oregon between 1989 and 1993. Decks were placed on a variety of existing structures using hydroblasting, milling and diamond grinding surface preparation....

  17. Ultra-thin whitetopping for general aviation airports in New Mexico.

    DOT National Transportation Integrated Search

    2002-06-01

    Whitetopping is a pavement rehabilitation construction practice where portland cement concrete (PCC) is placed over an existing asphalt concrete pavement as an overlay. Ultra-thin whitetopping (UTW) is generally a thin overlay with a thickness betwee...

  18. Cracking and debonding of a thin fiber reinforced concrete overlay : research brief.

    DOT National Transportation Integrated Search

    2017-03-01

    Experimental tests found that the tensile interfacial energy : increased with fiber-reinforcement. Also bond tests indicated : that interfacial fracture occurred through the overlay mixture and : was proportional to the number of fibers which interse...

  19. Assessment of asphalt interlayer designed on jointed concrete.

    DOT National Transportation Integrated Search

    2014-11-01

    Reflective cracking in hot mix asphalt (HMA) overlays has been a common cause of poor pavement performance in Iowa for : many years. Reflective cracks commonly occur in HMA overlays when deteriorated portland cement concrete is paved over with : HMA....

  20. Performance assessment of Wisconsin's whitetopping and ultra thin whitetopping projects.

    DOT National Transportation Integrated Search

    2010-03-01

    Whitetopping overlay is a concrete overlay on the prepared existing hot mix asphalt (HMA) pavement to : improve both the structural and functional capability. Its a relatively new rehabilitation technology for : deteriorated HMA. If the slab thick...

  1. Performance of bridge deck overlays in Virginia : phase 1 : state of overlays : final report

    DOT National Transportation Integrated Search

    2017-05-01

    Maintaining the existing transportation infrastructure is a major concern of the Virginia Department of Transportation : (VDOT). The increased user travel costs, safety concerns, and financial burdens involved in replacing deteriorating decks are : r...

  2. Evaluation of thin asphalt overlay practice preserving Nebraska's asphalt pavements.

    DOT National Transportation Integrated Search

    2015-06-01

    This study examined the current thin asphalt overlay practices implemented in Nebraska. To that end, the mechanical : properties and performance characteristics of the two mixtures (i.e., SLX and SPH) were compared by carrying out : laboratory tests ...

  3. Investigation of silica fume concrete bridge deck overlay failures.

    DOT National Transportation Integrated Search

    2016-02-23

    Many of these microsilica-modified concrete or silica fume concrete (SFC) bridge deck overlays across the State of Wyoming are suffering from premature distress that includes random cracking, loss of bond and delaminations. To determine the most like...

  4. Crack sealing before overlaying an asphalt concrete surface.

    DOT National Transportation Integrated Search

    1997-01-01

    In an attempt to reduce reflective cracking on overlay projects a study was conducted that : consisted of sealing all transverse cracks greater than inch with hot crack sealers before the : project was resurfaced. The experiment will evaluate the ...

  5. Evaluation of the Installation and Initial Condition of Rosphalt Overlays on Bridge Decks.

    DOT National Transportation Integrated Search

    2013-06-01

    "Protection systems are placed on bridge decks to retard the intrusion of chlorides and moisture that can eventually cause : corrosion deterioration. The Virginia Department of Transportation typically uses hydraulic cement concrete (HCC) overlays of...

  6. Bonded concrete overlay performance in Illinois

    DOT National Transportation Integrated Search

    2002-04-01

    Two bonded concrete overlay rehabilitation projects were constructed in Illinois during the 1990's. The first project was constructed in 1994 and 1995 on Interstate 80, east of Moline. The second project was constructed in 1996 on Interstate 88 near ...

  7. Creating Interactive Graphical Overlays in the Advanced Weather Interactive Processing System Using Shapefiles and DGM Files

    NASA Technical Reports Server (NTRS)

    Barrett, Joe H., III; Lafosse, Richard; Hood, Doris; Hoeth, Brian

    2007-01-01

    Graphical overlays can be created in real-time in the Advanced Weather Interactive Processing System (AWIPS) using shapefiles or Denver AWIPS Risk Reduction and Requirements Evaluation (DARE) Graphics Metafile (DGM) files. This presentation describes how to create graphical overlays on-the-fly for AWIPS, by using two examples of AWIPS applications that were created by the Applied Meteorology Unit (AMU) located at Cape Canaveral Air Force Station (CCAFS), Florida. The first example is the Anvil Threat Corridor Forecast Tool, which produces a shapefile that depicts a graphical threat corridor of the forecast movement of thunderstorm anvil clouds, based on the observed or forecast upper-level winds. This tool is used by the Spaceflight Meteorology Group (SMG) at Johnson Space Center, Texas and 45th Weather Squadron (45 WS) at CCAFS to analyze the threat of natural or space vehicle-triggered lightning over a location. The second example is a launch and landing trajectory tool that produces a DGM file that plots the ground track of space vehicles during launch or landing. The trajectory tool can be used by SMG and the 45 WS forecasters to analyze weather radar imagery along a launch or landing trajectory. The presentation will list the advantages and disadvantages of both file types for creating interactive graphical overlays in future AWIPS applications. Shapefiles are a popular format used extensively in Geographical Information Systems. They are usually used in AWIPS to depict static map backgrounds. A shapefile stores the geometry and attribute information of spatial features in a dataset (ESRI 1998). Shapefiles can contain point, line, and polygon features. Each shapefile contains a main file, index file, and a dBASE table. The main file contains a record for each spatial feature, which describes the feature with a list of its vertices. The index file contains the offset of each record from the beginning of the main file. The dBASE table contains records for each attribute. Attributes are commonly used to label spatial features. Shapefiles can be viewed, but not created in AWIPS. As a result, either third-party software can be installed on an AWIPS workstation, or new software must be written to create shapefiles in the correct format.

  8. Improving management performance of P2PSIP for mobile sensing in wireless overlays.

    PubMed

    Sendín-Raña, Pablo; González-Castaño, Francisco Javier; Gómez-Cuba, Felipe; Asorey-Cacheda, Rafael; Pousada-Carballo, José María

    2013-11-08

    Future wireless communications are heading towards an all-Internet Protocol (all-IP) design, and will rely on the Session Initiation Protocol (SIP) to manage services, such as voice over IP (VoIP). The centralized architecture of traditional SIP has numerous disadvantages for mobile ad hoc services that may be possibly overcome by advanced peer-to-peer (P2P) technologies initially developed for the Internet. In the context of mobile sensing, P2PSIP protocols facilitate decentralized and fast communications with sensor-enabled terminals. Nevertheless, in order to make P2PSIP protocols feasible in mobile sensing networks, it is necessary to minimize overhead transmissions for signaling purposes, which reduces the battery lifetime. In this paper, we present a solution to improve the management of wireless overlay networks by defining an adaptive algorithm for the calculation of refresh time. The main advantage of the proposed algorithm is that it takes into account new parameters, such as the delay between nodes, and provides satisfactory performance and reliability levels at a much lower management overhead than previous approaches. The proposed solution can be applied to many structured P2P overlays or P2PSIP protocols. We evaluate it with Kademlia-based distributed hash tables (DHT) and dSIP.

  9. Improving Management Performance of P2PSIP for Mobile Sensing in Wireless Overlays

    PubMed Central

    Sendín-Raña, Pablo; González-Castaño, Francisco Javier; Gómez-Cuba, Felipe; Asorey-Cacheda, Rafael; Pousada-Carballo, José María

    2013-01-01

    Future wireless communications are heading towards an all-Internet Protocol (all-IP) design, and will rely on the Session Initiation Protocol (SIP) to manage services, such as voice over IP (VoIP). The centralized architecture of traditional SIP has numerous disadvantages for mobile ad hoc services that may be possibly overcome by advanced peer-to-peer (P2P) technologies initially developed for the Internet. In the context of mobile sensing, P2PSIP protocols facilitate decentralized and fast communications with sensor-enabled terminals. Nevertheless, in order to make P2PSIP protocols feasible in mobile sensing networks, it is necessary to minimize overhead transmissions for signaling purposes, which reduces the battery lifetime. In this paper, we present a solution to improve the management of wireless overlay networks by defining an adaptive algorithm for the calculation of refresh time. The main advantage of the proposed algorithm is that it takes into account new parameters, such as the delay between nodes, and provides satisfactory performance and reliability levels at a much lower management overhead than previous approaches. The proposed solution can be applied to many structured P2P overlays or P2PSIP protocols. We evaluate it with Kademlia-based distributed hash tables (DHT) and dSIP PMID:24217358

  10. Voice over internet protocol with prepaid calling card solutions

    NASA Astrophysics Data System (ADS)

    Gunadi, Tri

    2001-07-01

    The VoIP technology is growing up rapidly, it has big network impact on PT Telkom Indonesia, the bigger telecommunication operator in Indonesia. Telkom has adopted VoIP and one other technology, Intelligent Network (IN). We develop those technologies together in one service product, called Internet Prepaid Calling Card (IPCC). IPCC is becoming new breakthrough for the Indonesia telecommunication services especially on VoIP and Prepaid Calling Card solutions. Network architecture of Indonesia telecommunication consists of three layer, Local, Tandem and Trunck Exchange layer. Network development researches for IPCC architecture are focus on network overlay hierarchy, Internet and PSTN. With this design hierarchy the goal of Interworking PSTN, VoIP and IN calling card, become reality. Overlay design for IPCC is not on Trunck Exchange, this is the new architecture, these overlay on Tandem and Local Exchange, to make the faster call processing. The nodes added: Gateway (GW) and Card Management Center (CMC) The GW do interfacing between PSTN and Internet Network used ISDN-PRA and Ethernet. The other functions are making bridge on circuit (PSTN) with packet (VoIP) based and real time billing process. The CMC used for data storage, pin validation, report activation, tariff system, directory number and all the administration transaction. With two nodes added the IPCC service offered to the market.

  11. New overlay measurement technique with an i-line stepper using embedded standard field image alignment marks for wafer bonding applications

    NASA Astrophysics Data System (ADS)

    Kulse, P.; Sasai, K.; Schulz, K.; Wietstruck, M.

    2017-06-01

    In the last decades the semiconductor technology has been driven by Moore's law leading to high performance CMOS technologies with feature sizes of less than 10 nm [1]. It has been pointed out that not only scaling but also the integration of novel components and technology modules into CMOS/BiCMOS technologies is becoming more attractive to realize smart and miniaturized systems [2]. Driven by new applications in the area of communication, health and automation, new components and technology modules such as BiCMOS embedded RF-MEMS, high-Q passives, Sibased microfluidics and InP-SiGe BiCMOS heterointegration have been demonstrated [3-6]. In contrast to standard VLSI processes fabricated on front side of the silicon wafer, these new technology modules require addition backside processing of the wafer; thus an accurate alignment between the front and backside of the wafer is mandatory. In previous work an advanced back to front side alignment technique and implementation into IHP's 0.25/0.13 μm high performance SiGe:C BiCMOS backside process module has been presented [7]. The developed technique enables a high resolution and accurate lithography on the backside of BiCMOS wafer for additional backside processing. In addition to the aforementioned back side process technologies, new applications like Through-Silicon Vias (TSV) for interposers and advanced substrate technologies for 3D heterogeneous integration demand not only single wafer fabrication but also processing of wafer stacks provided by temporary and permanent wafer bonding [8]. Therefore, the available overlay measurement techniques are not suitable if overlay and alignment marks are realized at the bonding interface of a wafer stack which consists of both a silicon device and a silicon carrier wafer. The former used EVG 40NT automated overlay measurement system, which use two opposite positioned microscopes inspecting simultaneous the wafer back and front side, is not capable measuring embedded overlay marks. In this work, the non-contact infrared alignment system of the Nikon i-line Stepper NSR-SF150 for both the alignment and the overlay determination of bonded wafer stacks with embedded alignment marks are used to achieve an accurate alignment between the different wafer sides. The embedded field image alignment (FIA) marks of the interface and the device wafer top layer are measured in a single measurement job. By taking the offsets between all different FIA's into account, after correcting the wafer rotation induced FIA position errors, hence an overlay for the stacked wafers can be determined. The developed approach has been validated by a standard back to front side application. The overlay was measured and determined using both, the EVG NT40 automated measurement system with special overlay marks and the measurement of the FIA marks of the front and back side layer. A comparison of both results shows mismatches in x and y translations smaller than 200 nm, which is relatively small compared to the overlay tolerances of +/-500 nm for the back to front side process. After the successful validation of the developed technique, special wafer stacks with FIA alignment marks in the bonding interface are fabricated. Due to the super IR light transparency of both doubled side polished wafers, the embedded FIA marks generate a stable and clear signal for accurate x and y wafer coordinate positioning. The FIA marks of the device wafer top layer were measured under standard condition in a developed photoresist mask without IR illumination. Following overlay calculation shows an overlay of less than 200 nm, which enables very accurate process condition for highly scaled TSV integration and advanced substrate integration into IHP's 0.25/0.13 μm SiGe:C BiCMOS technology. The presented method can be applied for both the standard back to front side process technologies and also new temporary and permanent wafer bonding applications.

  12. Probing properties of the interfacial perimeter sites in TiO x /Au/SiO 2 with 2-propanol decomposition

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Wu, Yi Y.; Kung, Harold H.

    The decomposition of 2-propanol was studied over SiO2, SiO2 with an overlayer of TiO2 (Ti/SiO2), Au/SiO2, and Au/SiO2 with an overlayer of TiO2 (Ti/[Au/SiO2]) at 170–190 °C. There was no reaction on SiO2. Propene was the only product on Ti/SiO2, and its rate of formation increased proportionally with the Ti content. Acetone was the major product (selectivity 65–99%) on all Au-containing catalysts. Its rate of formation also increased with Ti loading. In addition, small amounts of propene were also formed on Ti/[Au/SiO2] the rate of which increased with Ti loading. Characterization of the catalysts with N2 adsorption, STEM, DR-UV-vis spectroscopy,more » XPS, XANES and EXAFS suggested that the Ti formed an amorphous TiO2 overlayer on the catalyst. At high Ti loadings (4–5 wt.%), there were patches of thick porous TiO2 layer, and some microdomains of crystalline TiO2 could be detected. Au was present as 1–3 nm nanoparticles on all catalysts, before and after used in reaction. Only Lewis acid sites were detected based on results from pyridine adsorption, and their quantities increased with Ti loading. Based on the comparison of reaction rates, the dependence of the kinetics on 2-propanol partial pressure, the apparent activation energies, and the effect of co-feeding O2 among different catalysts, it was concluded that propene was formed on the TiO2 overlayer, acetone was formed primarily at the Au-TiO2 interfacial perimeter sites, and α-C-H bond breaking preceding acetone formation was more facile on Au at the interfacial site than other surface Au atoms. Implication of these results to the selective acetone formation in the oxidation of propane in the presence of a O2/H2 mixture was discussed.« less

  13. Latex and microsilica modified concrete bridge deck overlays in Oregon : final report.

    DOT National Transportation Integrated Search

    1997-05-01

    The final report presents information collected by ODOT personnel from bridge deck overlays constructed in Oregon between 1989 and 1995. Decks were placed on a variety of existing bridge types prepared using hydrodemolition, milling, and diamond grin...

  14. Texas flexible pavements and overlays : data analysis plans and reporting format.

    DOT National Transportation Integrated Search

    2012-01-01

    This five-year project was initiated to collect materials and pavement performance data on a minimum of 100 : highway test sections around the State of Texas, incorporating flexible pavements and overlays. Besides being used to : calibrate and valida...

  15. Overview of latex modified concrete overlays : final report.

    DOT National Transportation Integrated Search

    1984-01-01

    Twelve bridges with latex modified concrete (LMC) overlays ranging in age from new to 13 years were studied and their general condition found to be good. The half-cell and chloride data were inconclusive because background data were not available for...

  16. Evaluation of thin overlays for bridge decks.

    DOT National Transportation Integrated Search

    2010-11-01

    Eight thin polymer overlay systems were evaluated in the laboratory and on two bridge decks exposed to trucks and passenger vehicles including those with studded tires. The products were Mark 154, Flex-O-Lith, Safetrack HW, Kwik Bond PPC MLS, Tyregri...

  17. Type A polymer concrete overlay field trials : interim report.

    DOT National Transportation Integrated Search

    1982-12-01

    On July 31 and August 1, 1982, the Oregon State Highway Division successfully placed a methyl methacrylate polymer concrete overlay on a portion of one span of a major interchange ramp in Portland, Oregon. Two proprietary polymer concretes were used ...

  18. Evaluation of concrete slab fracturing techniques in mitigating reflective cracking through asphalt overlays.

    DOT National Transportation Integrated Search

    2002-09-01

    This report presents the results of an evaluation of concrete slab fracturing techniques as a means of arresting or retarding reflective cracking through asphalt overlays placed on severely distressed portland cement concrete pavement. The study invo...

  19. Performance trends of rehabilitated AC pavements

    DOT National Transportation Integrated Search

    2000-10-01

    The General Pavement Study (GPS) 6 experiment, "AC Overlay of AC Pavements," involves pavement test sections where an asphalt concrete (AC) overlay was placed on an existing AC pavement. This TechBrief summarizes the results of a study of the GPS-6 e...

  20. Evaluation of design and construction issues of thin HMA overlays.

    DOT National Transportation Integrated Search

    2015-04-01

    While the overall implementation of thin HMA overlays in Texas has been successful, some issues need to be addressed: : appropriate blending of SAC A and SAC B aggregate to ensure adequate skid resistance; best practices to achieve adequate bonding :...

  1. Evaluation of thin overlays for bridge decks.

    DOT National Transportation Integrated Search

    2009-11-01

    Eight thin polymer overlay systems were evaluated in the laboratory and on two bridge decks exposed to trucks and passenger vehicles including those with studded tires. The products were Mark 154, Flex-O-Lith, Safetrack HW, Kwik Bond PPC MLS, Tyregri...

  2. Thin overlay guidelines : project selection, design, and construction.

    DOT National Transportation Integrated Search

    2015-04-01

    Thin hot mix asphalt (HMA) overlays are : cost-effective, high-performance maintenance : treatments. They can be laid at 1.0 to 0.5 inches : thick and consist of quality aggregate and binder : materials. The costs are generally more (per ton) : than ...

  3. Thin bonded P.C.C. resurfacing : final report.

    DOT National Transportation Integrated Search

    1982-06-01

    After the successful experimentation in Iowa with thin-bonded concrete overlays as an alternative to bituminous overlay, the Louisiana DOTD decided to resurface a short section of US 61, north of Baton Rouge, using this technique during April 1981. T...

  4. Tolerable strains for hot mix asphalt overlays over concrete pavements.

    DOT National Transportation Integrated Search

    2013-01-01

    Due to change of temperature and/or moisture, freezing-thaw cycles, loss of subgrade support by erosion, and traffic loading, concrete : pavements can develop different types of distresses during service life. Hot mix asphalt (HMA) overlays are commo...

  5. Evaluation of bonded concrete overlays over asphalt under accelerated loading : research project capsule.

    DOT National Transportation Integrated Search

    2014-05-01

    The overall objective of this research study is to evaluate the structural performance and loadcarrying : capacity of bonded concrete overlay pavement structures through accelerated pavement : testing and document the experience of mix design and con...

  6. Preparation of rumble strips prior to overlayment.

    DOT National Transportation Integrated Search

    2010-07-01

    The use of rumble strips in pavement to reduce run-off-road accidents is relatively new. In New Hampshire, these installations began in the mid to : late 1990s. The New Hampshire Department of Transportation performed its first overlay of rumble stri...

  7. Forensic Study of Early Failures with Unbonded Concrete Overlays

    DOT National Transportation Integrated Search

    2017-11-01

    A forensic investigation was conducted to identify failure mechanisms responsible for early failures of unbonded concrete overlays on selected projects in Ohio, including I-70 in Madison County, I-77 in Washington and Noble Counties, and I-90 in Lake...

  8. Performance of an unbonded concrete overlay on I-74

    DOT National Transportation Integrated Search

    2002-04-01

    In Illinois, the typical rehabilitation for a concrete pavement is full-depth patching of the distressed concrete, and overlaying the pavement with 3.25 inches of bituminous concrete. In cases where there are poor joints or extensive durability crack...

  9. Performance Evaluation of Cognitive Interference Channels Using a Spectrum Overlay Strategy

    NASA Technical Reports Server (NTRS)

    Knoblock, Eric J.

    2018-01-01

    The use of cognitive radios (CR) and cooperative communications techniques may assist in interference mitigation via sensing of the environment and dynamically altering communications parameters through the use of various mechanisms - one of which is the overlay technique. This report provides a performance analysis of an interference channel with a cognitive transceiver operating in an overlay configuration to evaluate the gains from using cognition. As shown in this report, a cognitive transceiver can simultaneously share spectrum while enhancing performance of non-cognitive nodes via knowledge of the communications channel as well as knowledge of neighboring users' modulation and coding schemes.

  10. Successful treatment of direct carotid-cavernous fistula in a patient with Ehlers-Danlos syndrome type IV without arterial puncture: the transvenous triple-overlay embolization (TAILOREd) technique.

    PubMed

    Huynh, Thien J; Morton, Ryan P; Levitt, Michael R; Ghodke, Basavaraj V; Wink, Onno; Hallam, Danial K

    2017-08-18

    We report successful transvenous treatment of direct carotid-cavernous fistula in a patient with Ehlers-Danlos syndrome type IV using a novel triple-overlay embolization (TAILOREd) technique without the need for arterial puncture, which is known to be highly risky in this patient group. The TAILOREd technique allowed for successful treatment using preoperative MR angiography as a three-dimensional overlay roadmap combined with cone beam CT and live fluoroscopy, precluding the need for an arterial puncture. 2017 BMJ Publishing Group Ltd.

  11. Kenny-Caffey Syndrome: oral findings and 4-year follow-up of overlay denture therapy.

    PubMed

    Demir, Tahsin; Kecik, Defne; Cehreli, Zafer C

    2007-01-01

    Kenny-Caffey Syndrome (KCS) is an extremely rare osteosclerotic bone dysplasia associated with hypocalcemia and ocular abnormalities. Although the condition is well reported in the medical literature, dental manifestations have not been discussed in great detail. The purpose of this report is to present specific oral features and prosthetic management in a KCS patient. Overlay dentures were utilized in the management of low vertical dimension of occlusion, congenital absence of several permanent teeth, and problems associated with function and esthetics. Results of the 4-year follow-up overlay denture therapy are presented.

  12. Disbond detection with piezoelectric wafer active sensors in RC structures strengthened with FRP composite overlays

    NASA Astrophysics Data System (ADS)

    Giurgiutiu, Victor; Harries, Kent; Petrou, Michael; Bost, Joel; Quattlebaum, Josh B.

    2003-12-01

    The capability of embedded piezoelectric wafer active sensors (PWAS) to perform in-situ nondestructive evaluation (NDE) for structural health monitoring (SHM) of reinforced concrete (RC) structures strengthened with fiber reinforced polymer (FRP) composite overlays is explored. First, the disbond detection method were developed on coupon specimens consisting of concrete blocks covered with an FRP composite layer. It was found that the presence of a disbond crack drastically changes the electromechanical (E/M) impedance spectrum measured at the PWAS terminals. The spectral changes depend on the distance between the PWAS and the crack tip. Second, large scale experiments were conducted on a RC beam strengthened with carbon fiber reinforced polymer (CFRP) composite overlay. The beam was subject to an accelerated fatigue load regime in a three-point bending configuration up to a total of 807,415 cycles. During these fatigue tests, the CFRP overlay experienced disbonding beginning at about 500,000 cycles. The PWAS were able to detect the disbonding before it could be reliably seen by visual inspection. Good correlation between the PWAS readings and the position and extent of disbond damage was observed. These preliminary results demonstrate the potential of PWAS technology for SHM of RC structures strengthened with FRP composite overlays.

  13. Passivation of hematite nanorod photoanodes with a phosphorus overlayer for enhanced photoelectrochemical water oxidation

    NASA Astrophysics Data System (ADS)

    Xiong, Dehua; Li, Wei; Wang, Xiaoguang; Liu, Lifeng

    2016-09-01

    Hematite (i.e., α-Fe2O3) nanorod photoanodes passivated with a phosphorus overlayer have been fabricated by decomposing sodium hypophosphite (NaH2PO2) at a low temperature over the hematite nanorod surface. Extensive scanning electron microscopy, transmission electron microscopy, x-ray diffractometry and UV-vis spectroscopy characterizations confirm that conformal deposition of an amorphous phosphorus overlayer does not change the crystal structure, morphology, and optical absorption properties of hematite photoanodes. X-ray photoelectron spectroscopy reveals that phosphorus in the deposited overlayer exists in an oxidized state. Comprehensive steady-state polarization, transient photocurrent response, and impedance spectroscopy measurements as well as Mott-Schottky analysis manifest that the phosphorus overlayer is able to effectively passivate surface states and suppress electron-hole recombination, substantially enhancing the photocurrent for water oxidation. Combining the phosphorization treatment with two-step thermal activation, a photocurrent density of 1.1 mA cm-2 is achieved at 1.23 V versus reversible hydrogen electrode under illumination of 100 mW cm-2, ca 55 times higher than that of the non-activated pristine hematite photoanode measured under the same conditions. The simple and fast phosphorization strategy we present here can be readily applied to passivate surfaces of other semiconductor photoelectrodes to improve their photoelectrochemical performance.

  14. Comparative evaluation of concrete sealers and multiple layer polymer concrete overlays. Interim report no. 1.

    DOT National Transportation Integrated Search

    1987-01-01

    The report presents comparisons of initial evaluations of several concrete sealers and multiple layer polymer concrete overlays. The sealers evaluated included a solvent-dlspersed epoxy, a water-dlspersed epoxy, a silane, and a high molecular weight ...

  15. Design and construction recommendations for thin overlays in Texas.

    DOT National Transportation Integrated Search

    2012-10-01

    Thin HMA overlays, laid at 1.0 inch or thinner, are cost-effective surface maintenance options. The primary focus of this research was : to develop specifications for three such mixes: fine dense-graded mix (fine DGM), fine-graded stone matrix asphal...

  16. Polymer concrete overlay test program : Lebanon Ditch Bridge : final report.

    DOT National Transportation Integrated Search

    1983-01-01

    This report presents information on the installation of a thin polymer concrete overlay and the evaluation of its durability after a 15-month in-service period. The project was performed by the Oregon State Highway Division under the sponsorship of t...

  17. Interlayer Stress Absorbing Composite (ISAC) for Mitigating Reflection Cracking in Asphalt Concrete Overlays

    DOT National Transportation Integrated Search

    1996-06-01

    To approach the reflection cracking problem in AC overlays systematically the properties of the materials intended to be used in an ISAC system were first identified. Various thermal/structural models and laboratory equipment were used for this purpo...

  18. Dynamic testing of the T223 bridge rail.

    DOT National Transportation Integrated Search

    2009-09-01

    The TxDOT T203 bridge rail is often used on bridges where asphalt overlays reduce the effective : height of the bridge rail. This reduction in height due to asphalt paving overlay is undesirable. For this : project, several geometric features were ch...

  19. Tests of HMA overlays using geosynthetics to reduce reflection cracking.

    DOT National Transportation Integrated Search

    2009-12-01

    The primary objective of this field phase of the research project was to evaluate geosynthetic : products placed under or within hot mix asphalt overlays to reduce the severity or delay the appearance of : reflection cracks and to calibrate and valid...

  20. Tolerable strains for hot mix asphalt overlays over concrete pavements : [technical summary].

    DOT National Transportation Integrated Search

    2013-01-01

    Due to change of temperature and/or moisture, freezing-thaw cycles, loss of subgrade support by erosion, and traffic loading, concrete pavements can develop different types of distresses during service life. Hot mix asphalt (HMA) overlays are commonl...

  1. Full-scale bonded concrete overlay on IH-30 in Ft. Worth, Texas

    DOT National Transportation Integrated Search

    2000-10-01

    This report presents the research and recommendations regarding the rehabilitation of an urban section of IH-30 in west Fort Worth, Texas. Bonded concrete overlays have proven to be a viable solution for rehabilitation of heavily traveled pavement se...

  2. Construction of a thin-bonded Portland cement concrete overlay using accelerated paving techniques.

    DOT National Transportation Integrated Search

    1992-01-01

    The report describes the Virginia Department of Transportations' first modern experience with the construction of thin-bonded Portland cement concrete overlays of existing concrete pavements and with the fast track mode of rigid paving. The study was...

  3. Evaluation of cold in-place recycling for rehabilitation of transverse cracking on US 412.

    DOT National Transportation Integrated Search

    2007-12-01

    Successful rehabilitation of transverse cracked hot mix asphalt (HMA) pavements has been a challenge : for state DOTs. Conventional thin HMA overlays allow the rapid return of the existing transverse cracks : and thicker HMA overlays are cost prohibi...

  4. Thin bonded P.C.C. resurfacing : interim report No. 1.

    DOT National Transportation Integrated Search

    1982-06-01

    After the successful experimentation in Iowa with thin-bonded concrete overlays as an alternative to bituminous overlay, the Louisiana DOTD decided to resurface a short section of US 61, north of Baton Rouge, using this technique during April 1981. T...

  5. Continued implementation of high performance thin overlays in Texas districts.

    DOT National Transportation Integrated Search

    2017-06-22

    As part of Research Project 0-5598, outputs include guidelines and specifications on how a district can design and construct long-life overlays using the concept of balanced mix design; and training materials describing the best ways to select, desig...

  6. Cost effective prevention of reflective cracking of composite pavement : research project capsule.

    DOT National Transportation Integrated Search

    2008-12-01

    Reflection cracks are caused by discontinuities (cracks or joints) in underlying layers, which : propagate through a hot-mix asphalt (HMA) overlay due to continuous movement at the crack : prompted by thermal and traffic loading. If the new overlay i...

  7. What Drives Metal-Surface Step Bunching in Graphene Chemical Vapor Deposition?

    NASA Astrophysics Data System (ADS)

    Yi, Ding; Luo, Da; Wang, Zhu-Jun; Dong, Jichen; Zhang, Xu; Willinger, Marc-Georg; Ruoff, Rodney S.; Ding, Feng

    2018-06-01

    Compressive strain relaxation of a chemical vapor deposition (CVD) grown graphene overlayer has been considered to be the main driving force behind metal surface step bunching (SB) in CVD graphene growth. Here, by combining theoretical studies with experimental observations, we prove that the SB can occur even in the absence of a compressive strain, is enabled by the rapid diffusion of metal adatoms beneath the graphene and is driven by the release of the bending energy of the graphene overlayer in the vicinity of steps. Based on this new understanding, we explain a number of experimental observations such as the temperature dependence of SB, and how SB depends on the thickness of the graphene film. This study also shows that SB is a general phenomenon that can occur in all substrates covered by films of two-dimensional (2D) materials.

  8. CARETS: A prototype regional environmental information system. Volume 5: Interpretation, compilation and field verification procedures in the CARETS project

    NASA Technical Reports Server (NTRS)

    Alexander, R. H. (Principal Investigator); Deforth, P. W.; Fitzpatrick, K. A.; Lins, H. F., Jr.; Mcginty, H. K., III

    1975-01-01

    The author has identified the following significant results. Level 2 land use mapping from high altitude aircraft photography at a scale of 1:100,000 required production of a photomosaic mapping base for each of the 48, 50 x 50 km sheets, and the interpretation and coding of land use polygons on drafting film overlays. To enhance the value of the land use sheets, a series of overlays was compiled, showing cultural features, county boundaries and census tracts, surface geology, and drainage basins. In producing level 1 land use maps from LANDSAT imagery, at a scale of 1:250,000 drafting film was directly overlaid on LANDSAT color composite transparencies. Numerous areas of change were identified, but extensive areas of false changes were also noted.

  9. [Halos and multifocal intraocular lenses: origin and interpretation].

    PubMed

    Alba-Bueno, F; Vega, F; Millán, M S

    2014-10-01

    To present the theoretical and experimental characterization of the halo in multifocal intraocular lenses (MIOL). The origin of the halo in a MIOL is the overlaying of 2 or more images. Using geometrical optics, it can be demonstrated that the diameter of each halo depends on the addition of the lens (ΔP), the base power (P(d)), and the diameter of the IOL that contributes to the «non-focused» focus. In the image plane that corresponds to the distance focus, the halo diameter (δH(d)) is given by: δH(d)=d(pn) ΔP/P(d), where d(pn) is the diameter of the IOL that contributes to the near focus. Analogously, in the near image plane the halo diameter (δH(n)) is: δH(n)=d(pd) ΔP/P(d), where d(pd) is the diameter of the IOL that contributes to the distance focus. Patients perceive halos when they see bright objects over a relatively dark background. In vitro, the halo can be characterized by analyzing the intensity profile of the image of a pinhole that is focused by each of the foci of a MIOL. A comparison has been made between the halos induced by different MIOL of the same base power (20D) in an optical bench. As predicted by theory, the larger the addition of the MIOL, the larger the halo diameter. For large pupils and with MIOL with similar aspheric designs and addition (SN6AD3 vs ZMA00), the apodized MIOL has a smaller halo diameter than a non-apodized one in distance vision, while in near vision the size is very similar, but the relative intensity is higher in the apodized MIOL. When comparing lenses with the same diffractive design, but with different spherical-aspheric base design (SN60D3 vs SN6AD3), the halo in distance vision of the spherical MIOL is larger, while in near vision the spherical IOL induces a smaller halo, but with higher intensity due to the spherical aberration of the distance focus in the near image. In the case of a trifocal-diffractive IOL (AT LISA 839MP) the most noticeable characteristic is the double-halo formation due to the 2 non-focused powers. Copyright © 2013 Sociedad Española de Oftalmología. Published by Elsevier Espana. All rights reserved.

  10. I-line stepper based overlay evaluation method for wafer bonding applications

    NASA Astrophysics Data System (ADS)

    Kulse, P.; Sasai, K.; Schulz, K.; Wietstruck, M.

    2018-03-01

    In the last decades the semiconductor technology has been driven by Moore's law leading to high performance CMOS technologies with feature sizes of less than 10 nm [1]. It has been pointed out that not only scaling but also the integration of novel components and technology modules into CMOS/BiCMOS technologies is becoming more attractive to realize smart and miniaturized systems [2]. Driven by new applications in the area of communication, health and automation, new components and technology modules such as BiCMOS embedded RF-MEMS, high-Q passives, Sibased microfluidics and InP-SiGe BiCMOS heterointegration have been demonstrated [3-6]. In contrast to standard VLSI processes fabricated on front side of the silicon wafer, these new technology modules additionally require to process the backside of the wafer; thus require an accurate alignment between the front and backside of the wafer. In previous work an advanced back to front side alignment technique and implementation into IHP's 0.25/0.13 µm high performance SiGe:C BiCMOS backside process module has been presented [7]. The developed technique enables a high resolution and accurate lithography on the backside of BiCMOS wafer for additional backside processing. In addition to the aforementioned back side process technologies, new applications like Through-Silicon Vias (TSV) for interposers and advanced substrate technologies for 3D heterogeneous integration demand not only single wafer fabrication but also processing of wafer stacks provided by temporary and permanent wafer bonding [8-9]. In this work, the non-contact infrared alignment system of the Nikon® i-line Stepper NSR-SF150 for both alignment and the overlay determination of bonded wafer stacks with embedded alignment marks are used to achieve an accurate alignment between the different wafer sides. The embedded field image alignment (FIA) marks of the interface and the device wafer top layer are measured in a single measurement job. By taking the offsets between all different FIA's into account, after correcting the wafer rotation induced FIA position errors, hence an overlay for the stacked wafers can be determined. The developed approach has been validated by a standard front side resist in resist experiment. After the successful validation of the developed technique, special wafer stacks with FIA alignment marks in the bonding interface are fabricated and exposed. Following overlay calculation shows an overlay of less than 200 nm, which enables very accurate process condition for highly scaled TSV integration and advanced substrate integration into IHP's 0.25/0.13 µm SiGe:C BiCMOS technology. The developed technique also allows using significantly smaller alignment marks (i.e. standard FIA alignment marks). Furthermore, the presented method is used, in case of wafer bow related overlay tool problems, for the overlay evaluation of the last two metal layers from production wafers prepared in IHP's standard 0.25/0.13 µm SiGe:C BiCMOS technology. In conclusion, the exposure and measurement job can be done with the same tool, minimizing the back to front side/interface top layer misalignment which leads to a significant device performance improvement of backside/TSV integrated components and technologies.

  11. Texas flexible pavements and overlays : calibration plans for M-E models and related software.

    DOT National Transportation Integrated Search

    2013-06-01

    This five-year project was initiated to collect materials and pavement performance data on a minimum of 100 highway test sections around the State of Texas, incorporating flexible pavements and overlays. Besides being used to calibrate and validate m...

  12. 12. DETAIL INDICATING TRANSITION FROM ORIGINAL SURFACE TO GUNITE OVERLAY ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    12. DETAIL INDICATING TRANSITION FROM ORIGINAL SURFACE TO GUNITE OVERLAY ON UPSTREAM EMBANKMENT OF DAM (FROM REPAIRS COMPLETED IN 1977) - Upper Doughty Dam, 200 feet west of Garden State Parkway, 1.7 miles west of Absecon, Egg Harbor City, Atlantic County, NJ

  13. Recovery of Sublethally Injured Bacteria Using Selective Agar Overlays.

    ERIC Educational Resources Information Center

    McKillip, John L.

    2001-01-01

    This experiment subjects bacteria in a food sample and an environmental sample to conditions of sublethal stress in order to assess the effectiveness of the agar overlay method to recover sublethally injured cells compared to direct plating onto the appropriate selective medium. (SAH)

  14. Use of infrared thermography to detect thermal segregation in asphalt overlay and reflective cracking potential.

    DOT National Transportation Integrated Search

    2015-03-01

    The objectives of this study were to assess whether temperature differentials measured using Infrared : Thermography (IRT) occur in an overlay built on top of discontinuities such as joints and cracks and to : study the horizontal and vertical therma...

  15. Asphalt concrete overlays on CRCP : decision criteria, tack coat evaluation, and asphalt concrete mixture evaluation.

    DOT National Transportation Integrated Search

    2005-02-01

    This report presents the research undertaken within two areas of study of thin asphalt concrete (AC) overlays to rehabilitate : continuously reinforced concrete pavements (CRCP). The first one is the development of a decision tree for the project : s...

  16. Latex modified fibrous concrete : experimental feature : final report.

    DOT National Transportation Integrated Search

    1985-03-01

    In November 1980, a contractor requested permission to use a 1.5 inch thick Latex Modified Fibrous Concrete (LMFC) overlay in lieu of a 2.5 inch low slump concrete (Iowa System) or a 2.5 inch unreinforced latex modified concrete. The overlays were to...

  17. Investigation into shrinkage of high-performance concrete used for Iowa bridge decks and overlays.

    DOT National Transportation Integrated Search

    2013-09-01

    High-performance concrete (HPC) overlays have been used increasingly as an effective and economical method for bridge decks in Iowa and other states. However, due to its high cementitious material content, HPC often displays high shrinkage cracking p...

  18. Evaluation of thin epoxy system overlays for concrete bridge decks : interim report No. 1.

    DOT National Transportation Integrated Search

    1986-05-01

    Four epoxy overlay systems were applied to concrete bridge decks in north Louisiana to evaluate their performance as skid resistant surfaces primarily and also as concrete sealers. Dural Flexolith, Poly-Carb Flexogrid, and Con/Chem Cono/Crete were pl...

  19. Cost effective bridge deck reconstruction in Kansas using high-density concrete overlays and asphalt membrane overlays : final report.

    DOT National Transportation Integrated Search

    2009-08-01

    In 1976 the Federal Highway Administration (FHWA) approved federal aid funding for experimental : installations of corrosion protection for reinforcing steel in existing concrete bridge decks. Sixteen of the sixty-nine : Kansas bridges with Cost Effe...

  20. Evaluation of thin epoxy system overlays for concrete bridge decks : final report.

    DOT National Transportation Integrated Search

    1991-12-01

    Four overlay systems were applied to concrete bridge decks in north Louisiana in May 1995 to evaluate their performance as friction surface and also as concrete sealers. Dural Flexolith, Poly-Carb Flexogrid, and Con/Chem Con/Crete were placed on thre...

  1. Design of ultra high performance concrete as an overlay in pavements and bridge decks.

    DOT National Transportation Integrated Search

    2014-08-01

    The main objective of this research was to develop ultra-high performance concrete (UHPC) as a reliable, economic, low carbon foot : print and durable concrete overlay material that can offer shorter traffic closures due to faster construction. The U...

  2. An interdisciplinary analysis of multispectral satellite data for selected cover types in the Colorado Mountains, using automatic data processing techniques

    NASA Technical Reports Server (NTRS)

    Hoffer, R. M. (Principal Investigator)

    1975-01-01

    The author has reported the following significant results. A data set containing SKYLAB, LANDSAT, and topographic data has been overlayed, registered, and geometrically corrected to a scale of 1:24,000. After geometrically correcting both sets of data, the SKYLAB data were overlayed on the LANDSAT data. Digital topographic data were then obtained, reformatted, and a data channel containing elevation information was then digitally overlayed onto the LANDSAT and SKYLAB spectral data. The 14,039 square kilometers involving 2,113, 776 LANDSAT pixels represents a relatively large data set available for digital analysis. The overlayed data set enables investigators to numerically analyze and compare two sources of spectral data and topographic data from any point in the scene. This capability is new and it will permit a numerical comparison of spectral response with elevation, slope, and aspect. Utilization of the spectral and topographic data together to obtain more accurate classifications of the various cover types present is feasible.

  3. Field Performance of Fiber-Reinforced Concrete Airfield Pavements.

    DTIC Science & Technology

    1986-07-01

    were less severe at some fiver-reinforced concrete pavements at JFK airport in New York than at some of the other airports. The pavements at JFK ... airport did use a poly- ethylene sheet as a bond breaker between the fiber-reinforced overlay and base pavement. This may have helped reduce frictional

  4. FIAMODEL: Users Guide Version 3.0.

    Treesearch

    Scott A. Pugh; David D. Reed; Kurt S. Pregitzer; Patrick D. Miles

    2002-01-01

    FIAMODEL is a geographic information system (GIS program used to summarize Forest Inventory and Analysis (FIA, USDA Forest Service) data such as volume. The model runs in ArcView and allows users to select FIA plots with heads-up-digitizing, overlays of digital map layers, or queries based on specific plot attributes.

  5. The USAF Stability and Control Digital DATCOM. Volume II. Implementation of Datcom Methods

    DTIC Science & Technology

    1979-04-01

    10N1S PAGE (Wheon 004 Enitletd4 811 UNCLASSIFIED SLkCUMITY CLASSIFICATION Or TAIIS PLQOS(W 1 D#* *,.E) , ---- program capabilities, input and output...J F. )W ..)- vi, w V)4 iI- C,)- co C’,J m m ~ 24 0 cr.’ >44 -i u S-P 0 CC uju w-12. 4.)L LW 3 0- -r DDc o0- C1 oa =ca C CC LA. CDCd LLjJ o 0...is located,, XX is the primary overlay number in decimal , and YY is the secondary overlay number in decimal . Hence, each overlay is written to a disk

  6. Prevention of pressure ulcers with a static air support surface: A systematic review.

    PubMed

    Serraes, Brecht; van Leen, Martin; Schols, Jos; Van Hecke, Ann; Verhaeghe, Sofie; Beeckman, Dimitri

    2018-06-01

    The aims of this study were to identify, assess, and summarise available evidence about the effectiveness of static air mattress overlays to prevent pressure ulcers. The primary outcome was the incidence of pressure ulcers. Secondary outcomes included costs and patient comfort. This study was a systematic review. Six electronic databases were consulted: Cochrane Library, EMBASE, PubMed (Medline), CINAHL (EBSCOhost interface), Science direct, and Web of Science. In addition, a hand search through reviews, conference proceedings, and the reference lists of the included studies was performed to identify additional studies. Potential studies were reviewed and assessed by 2 independent authors based on the title and abstract. Decisions regarding inclusion or exclusion of the studies were based on a consensus between the authors. Studies were included if the following criteria were met: reporting an original study; the outcome was the incidence of pressure ulcer categories I to IV when using a static air mattress overlay and/or in comparison with other pressure-redistribution device(s); and studies published in English, French, and Dutch. No limitation was set on study setting, design, and date of publication. The methodological quality assessment was evaluated using the Critical Appraisal Skills Program Tool. Results were reported in a descriptive way to reflect the exploratory nature of the review. The searches included 13 studies: randomised controlled trials (n = 11) and cohort studies (n = 2). The mean pressure ulcer incidence figures found in the different settings were, respectively, 7.8% pressure ulcers of categories II to IV in nursing homes, 9.06% pressure ulcers of categories I to IV in intensive care settings, and 12% pressure ulcers of categories I to IV in orthopaedic wards. Seven comparative studies reported a lower incidence in the groups of patients on a static air mattress overlay. Three studies reported a statistical (P < .1) lower incidence compared with a standard hospital mattress (10 cm thick, density 35 kg/m 3 ), a foam mattress (15 cm thick), and a viscoelastic foam mattress (15 cm thick). No significant difference in incidence, purchase costs, and patient comfort was found compared with dynamic air mattresses. This review focused on the effectiveness of static air mattress overlays to prevent pressure ulcers. There are indications that these mattress overlays are more effective in preventing pressure ulcers compared with the use of a standard mattress or a pressure-reducing foam mattress in nursing homes and intensive care settings. However, interpretation of the evidence should be performed with caution due to the wide variety of methodological and/or reporting quality levels of the included studies. © 2018 Medicalhelplines.com Inc and John Wiley & Sons Ltd.

  7. Development of an improved overlay design procedure for Oregon : volume II, evaluation of procedure.

    DOT National Transportation Integrated Search

    1987-12-01

    This report is the second in a three-volume series dealing with the development of an improved overlay design procedure for Oregon. This report presents the results of the second-year findings. Data from five projects were collected and analyzed usin...

  8. Environmental influence on the bond between a polymer concrete overlay and an aluminum substrate.

    DOT National Transportation Integrated Search

    2000-04-01

    Chloride-ion-induced corrosion of reinforcing steel in concrete bridge decks has become a major problem in the United States. : Latex-modified concrete, low-slump dense concrete, and hot-mix asphalt membrane overlays are some of the most used : rehab...

  9. Condition of concrete overlays on Route 60 over Lynnhaven Inlet after 10 years.

    DOT National Transportation Integrated Search

    2009-01-01

    In 1996, 16 high performance concrete overlays were placed on two 28-span bridges on Route 60 over the Lynnhaven Inlet in Virginia Beach, Virginia. Thirteen concrete mixtures included a variety of combinations of silica fume (SF), fly ash, slag, late...

  10. Final report for Verglimit at hole-in-the-wall slide section : experimental feature evaluation.

    DOT National Transportation Integrated Search

    1989-06-01

    In 1983, experimental Verglimit overlays were placed on two Oregon bridges known to have icing problems. The performance of the test overlays, constructed on the Salmon River Bridge in Clackamas County and the Quartz Creek Bridge in Clatsop County, w...

  11. 0-6742 : evaluation of design and construction issues of thin HMA overlays.

    DOT National Transportation Integrated Search

    2014-08-01

    Thin hot-mix asphalt (HMA) overlays, placed : between 1.25 to 0.5 inches, have quickly become : a go-to maintenance treatment in Texas. While : implementation around the state is proving : successful, a few issues needed to be addressed: : 1. The una...

  12. Design and performance evaluation of very thin overlays in Texas.

    DOT National Transportation Integrated Search

    2009-06-01

    Very thin overlays 1-inch thick or less were placed as surface layers on five major highways in Texas. : These mixes were designed in the laboratory to have a balance of good rut resistance as measured by : TxDOTs Hamburg Wheel Tracking test and g...

  13. Control of reflection cracking in a fabric-reinforced overlay on jointed portland cement concrete pavement.

    DOT National Transportation Integrated Search

    1982-01-01

    A study of the installation and three-year performance evaluation of a fabric-reinforced bituminous concrete overlay of a jointed concrete pavement is reported. The fabric, a polypropylene in an asphaltic mastic, was shown to act as a significant det...

  14. Evaluation of high performance concrete overlays placed on Route 60 over Lynnhaven Inlet in Virginia.

    DOT National Transportation Integrated Search

    2000-08-01

    Sixteen high performance concrete overlays were placed on two 28-span bridges on Route 60 over Lynnhaven Inlet in Virginia Beach, Virginia, in the spring of 1996. The construction was funded with 20 percent Virginia Department of Transportation maint...

  15. Evaluation of the SafeLane overlay system for crash reduction on bridge deck surfaces.

    DOT National Transportation Integrated Search

    2010-03-01

    The winter performance of the SafeLane commercial overlay system has been evaluated at four installations on : bridge decks in the state of Minnesota. The study was conducted over a period of a total of three years. Analyses : included mechanical ...

  16. Latex modified fibrous concrete Sundial-Sandy River Section : interim report.

    DOT National Transportation Integrated Search

    1985-03-01

    In November 1980, a contractor requested permission to use a 1.5 inch thick Latex Modified Fibrous Concrete (LMFC) overlay in lieu of a 2.5 inch low slump concrete (Iowa System) or a 2.5 inch unreinforced latex modified concrete. The overlays were to...

  17. Study on High Resolution Membrane-Based Diffractive Optical Imaging on Geostationary Orbit

    NASA Astrophysics Data System (ADS)

    Jiao, J.; Wang, B.; Wang, C.; Zhang, Y.; Jin, J.; Liu, Z.; Su, Y.; Ruan, N.

    2017-05-01

    Diffractive optical imaging technology provides a new way to realize high resolution earth observation on geostationary orbit. There are a lot of benefits to use the membrane-based diffractive optical element in ultra-large aperture optical imaging system, including loose tolerance, light weight, easy folding and unfolding, which make it easy to realize high resolution earth observation on geostationary orbit. The implementation of this technology also faces some challenges, including the configuration of the diffractive primary lens, the development of high diffraction efficiency membrane-based diffractive optical elements, and the correction of the chromatic aberration of the diffractive optical elements. Aiming at the configuration of the diffractive primary lens, the "6+1" petal-type unfold scheme is proposed, which consider the compression ratio, the blocking rate and the development complexity. For high diffraction efficiency membrane-based diffractive optical element, a self-collimating method is proposed. The diffraction efficiency is more than 90 % of the theoretical value. For the chromatic aberration correction problem, an optimization method based on schupmann is proposed to make the imaging spectral bandwidth in visible light band reach 100 nm. The above conclusions have reference significance for the development of ultra-large aperture diffractive optical imaging system.

  18. Development of an improved overlay design procedure for Oregon : vol. I, interim report, background and framework.

    DOT National Transportation Integrated Search

    1986-12-01

    This report is the first in a three-volume series dealing with the development of an improved overlay design procedure for Oregon. This report presents the results of the first-year findings and includes: (1) a detailed review of the literature; (2) ...

  19. A field investigation of a concrete overlay containing silica fume on Route 50 over Opequon Creek.

    DOT National Transportation Integrated Search

    1993-01-01

    This study evaluated concretes containing silica fume for use in overlays as a suitable alternative to the widely used latex-modified concrete (LMC). A two-lane, four-span bridge deck was overlaid with concrete containing silica fume at 7 percent or ...

  20. Latex modified asphalt and experimental joint treatments on asphalt concrete overlays experimental project No. 3 : asphalt additives : final report.

    DOT National Transportation Integrated Search

    1991-06-01

    This report documents the construction, initial evaluation and final evaluation of several experimental features which were incorporated as part of an overlay of an existing PCC pavement in order to determine the feasibility of extending the asphalti...

  1. An Appraisal of the Irlen Technique of Correcting Reading Disorders Using Tinted Overlays and Tinted Lenses.

    ERIC Educational Resources Information Center

    Solan, Harold A.

    1990-01-01

    The article reviews three studies (EC 600 064-066) evaluating the effectiveness of using Irlen tinted lenses or overlays with reading-disabled persons. It is concluded that carefully designed and controlled studies do not currently lend support to the Irlen hypothesis. (DB)

  2. Evaluation of a conventional chip seal under an overlay to mitigate reflective cracking (informal).

    DOT National Transportation Integrated Search

    2015-03-01

    The Billings District initiated an experimental project in placing a conventional : chip seal (as an interlayer) on an existing pavement prior to an overlay : (composed of a 0.25 PMS thickness). The intent of the chip seal (CS) was to : seal exist...

  3. Accelerated testing for studying pavement design and performance (FY 2004) : thin bonded rigid overlay on PCCP and HMA (CISL experiment no. 13).

    DOT National Transportation Integrated Search

    2009-03-01

    The thirteenth full-scale Accelerated Pavement Test (APT) experiment at the Civil Infrastructure Laboratory (CISL) : of Kansas State University aimed to determine the response and the failure mode of thin concrete overlays. Four : pavement structures...

  4. Texas flexible pavements and overlays : year 1 report, test sections, data collection, analyses, and data storage system.

    DOT National Transportation Integrated Search

    2012-06-01

    This five-year project was initiated to collect materials and pavement performance data on a minimum of 100 highway test sections around the State of Texas, incorporating both flexible pavements and overlays. Besides being used to calibrate and valid...

  5. Asphalt Overlay Design Methods for Rigid Pavements Considering Rutting, Reflection Cracking, and Fatigue Cracking

    DOT National Transportation Integrated Search

    1998-10-01

    The overall objectives of this study were (1) to provide basic performance evaluation of asphalt overlays on rigid pavements and (2) to provide a design tool for supporting a long-range rehabilitation plan for the US 59 : corridor in the Lufkin Distr...

  6. An evaluation of two bridge deck overlay systems on the Rte. 85 bridges over the Roanoke River.

    DOT National Transportation Integrated Search

    1971-01-01

    Because of exposed reinforcing steel in some areas of the decks, the interstate route 85 bridges over the Roanoke River were treated with overlays in August 1969. In order to evaluate two different materials on a comparative basis, the Department of ...

  7. Asphalt overlay cost-effectiveness : Manitoba TGS and Minnesota SPS-5 projects 10-year ranking of treatments (1989-1999)

    DOT National Transportation Integrated Search

    2000-10-01

    This report reviews Manitoba's and Minnesota's Specific Pavement Studies (SPS-5) projects. The studies focus on investigating the performance of hot mix asphalt (HMA) overlays on HMA pavements and involve nine core test sections. The SPS-5 design var...

  8. Texas flexible pavements and overlays : interim report for phases 2 and 3 - data collection and model calibration.

    DOT National Transportation Integrated Search

    2017-05-01

    This five-year project was initiated to collect materials and pavement performance data on a minimum of 100 : highway test sections around the state of Texas, incorporating both flexible pavements and overlays. Besides : being used to calibrate and v...

  9. Evaluation of latex-modified and silica fume concrete overlays placed on six bridges in Virginia.

    DOT National Transportation Integrated Search

    2000-08-01

    Latex-modified and silica fume concrete overlays were placed on six bridges on I-95 south of Emporia, Virginia, in the fall of 1994. The construction was funded with 20% Virginia Department of Transportation maintenance funds and 80% special ISTEA Se...

  10. Evaluation of the installation and initial condition of high performance concrete overlays placed on Route 60 over Lynnhaven Inlet in Virginia.

    DOT National Transportation Integrated Search

    1999-04-01

    Sixteen high performance concrete overlays were placed on two 28-span bridges on Rte. 60 over Lynnhaven Inlet, Virginia Beach, : Virginia, in the spring of 1996. The construction was funded with 20 percent Virginia Department of Transportation mainte...

  11. Evolution of the SrTiO3 surface electronic state as a function of LaAlO3 overlayer thickness

    NASA Astrophysics Data System (ADS)

    Plumb, N. C.; Kobayashi, M.; Salluzzo, M.; Razzoli, E.; Matt, C. E.; Strocov, V. N.; Zhou, K. J.; Shi, M.; Mesot, J.; Schmitt, T.; Patthey, L.; Radović, M.

    2017-08-01

    The novel electronic properties emerging at interfaces between transition metal oxides, and in particular the discovery of conductivity in heterostructures composed of LaAlO3 (LAO) and SrTiO3 (STO) band insulators, have generated new challenges and opportunities in condensed matter physics. Although the interface conductivity is stabilized when LAO matches or exceeds a critical thickness of 4 unit cells (uc), other phenomena such as a universal metallic state found on the bare surface of STO single crystals and persistent photon-triggered conductivity in otherwise insulating STO-based interfaces raise important questions about the role of the LAO overlayer and the possible relations between vacuum/STO and LAO/STO interfaces. Here, using angle-resolved photoemission spectroscopy (ARPES) on in situ prepared samples complemented by resonant inelastic X-ray scattering (RIXS), we study how the metallic STO surface state evolves during the growth of a crystalline LAO overlayer. In all the studied samples, the character of the conduction bands, their carrier densities, the Ti3+ crystal field, and the response to photon irradiation bear strong similarities. Nevertheless, we report here that studied LAO/STO interfaces exhibit an instability toward an apparent 2 × 1 folding of the Fermi surface at and above a 4 uc thickness threshold, which distinguishes these heterostructures from bare STO and sub-critical-thickness LAO/STO.

  12. Techniques of contributing-area delineation for analysis of nonpoint-source contamination of Long Island, New York

    USGS Publications Warehouse

    Misut, P.

    1995-01-01

    Ninety shallow monitoring wells on Long Island, N.Y., were used to test the hypothesis that the correlation between the detection of volatile organic compounds (VOC's) at a well and explanatory variables representing land use, population density, and hydrogeologic conditions around the well is affected by the size and shape of the area defined as the contributing area. Explanatory variables are quantified through overlay of various specified contributing areas on 1:24 000-scale landuse and population-density geographic information system (GIS) coverages. Four methods of contributing-area delineation were used: (a) centering a circle of selected radius on the well site, (b) orienting a triangular area along the direction of horizontal ground-water flow to the well, (c) generating a shaped based on direction and magnitude of horizontal flow to the well, and (d) generating a shape based on three-dimensional particle pathlines backtracked from the well screen to the water table. The strongest correlations with VOC detections were obtained from circles of 400- to 1 000-meter radius. Improvement in correlation through delineations based on ground-water flow would require geographic overlay on more highly detailed GIS coverages than those used in the study.

  13. Discovery of novel InhA reductase inhibitors: application of pharmacophore- and shape-based screening approach.

    PubMed

    Kumar, Uday Chandra; Bvs, Suneel Kumar; Mahmood, Shaik; D, Sriram; Kumar-Sahu, Prashanta; Pulakanam, Sridevi; Ballell, Lluís; Alvarez-Gomez, Daniel; Malik, Siddharth; Jarp, Sarma

    2013-03-01

    InhA is a promising and attractive target in antimycobacterial drug development. InhA is involved in the reduction of long-chain trans-2-enoyl-ACP in the type II fatty acid biosynthesis pathway of Mycobacterium tuberculosis. Recent studies have demonstrated that InhA is one of the targets for the second line antitubercular drug ethionamide. In the current study, we have generated quantitative pharmacophore models using known InhA inhibitors and validated using a large test set. The validated pharmacophore model was used as a query to screen an in-house database of 400,000 compounds and retrieved 25,000 hits. These hits were further ranked based on its shape and feature similarity with potent InhA inhibitor using rapid overlay of chemical structures (OpenEye™) and subsequent hits were subjected for docking. Based on the pharmacophore, rapid overlay of chemical structures model and docking interactions, 32 compounds with more than eight chemotypes were selected, purchased and assayed for InhA inhibitory activity. Out of the 32 compounds, 28 demonstrated 10-38% inhibition against InhA at 10 µM. Further optimization of these analogues is in progress and will update in due course.

  14. Tunable antireflection from conformal Al-doped ZnO films on nanofaceted Si templates

    PubMed Central

    2014-01-01

    Photon harvesting by reducing reflection loss is the basis of photovoltaic devices. Here, we show the efficacy of Al-doped ZnO (AZO) overlayer on ion beam-synthesized nanofaceted silicon for suppressing reflection loss. In particular, we demonstrate thickness-dependent tunable antireflection (AR) from conformally grown AZO layer, showing a systematic shift in the reflection minima from ultraviolet to visible to near-infrared ranges with increasing thickness. Tunable AR property is understood in light of depth-dependent refractive index of nanofaceted silicon and AZO overlayer. This improved AR property significantly increases the fill factor of such textured heterostructures, which reaches its maximum for 60-nm AZO compared to the ones based on planar silicon. This thickness matches with the one that shows the maximum reduction in surface reflectance. PACS 81.07.-b; 42.79.Wc; 81.16.Rf; 81.15.Cd PMID:24808799

  15. COSIM: A Finite-Difference Computer Model to Predict Ternary Concentration Profiles Associated With Oxidation and Interdiffusion of Overlay-Coated Substrates

    NASA Technical Reports Server (NTRS)

    Nesbitt, James A.

    2001-01-01

    A finite-difference computer program (COSIM) has been written which models the one-dimensional, diffusional transport associated with high-temperature oxidation and interdiffusion of overlay-coated substrates. The program predicts concentration profiles for up to three elements in the coating and substrate after various oxidation exposures. Surface recession due to solute loss is also predicted. Ternary cross terms and concentration-dependent diffusion coefficients are taken into account. The program also incorporates a previously-developed oxide growth and spalling model to simulate either isothermal or cyclic oxidation exposures. In addition to predicting concentration profiles after various oxidation exposures, the program can also be used to predict coating life based on a concentration dependent failure criterion (e.g., surface solute content drops to 2%). The computer code is written in FORTRAN and employs numerous subroutines to make the program flexible and easily modifiable to other coating oxidation problems.

  16. Characteristic investigation of Golay9 multiple mirror telescope with a spherical primary mirror

    NASA Astrophysics Data System (ADS)

    Wu, Feng; Wu, Quanying; Zhu, Xifang; Xiang, Ruxi; Qian, Lin

    2017-10-01

    The sparse aperture provides a novel solution to the manufacturing difficulties of modern super large telescopes. Golay configurations are optimal in the sparse aperture family. Characteristics of the Golay9 multiple mirror telescope having a spherical primary mirror are investigated. The arrangement of the nine sub-mirrors is discussed after the planar Golay9 configuration is analyzed. The characteristics of the entrance pupil are derived by analyzing the sub-aperture shapes with different relative apertures and sub-mirror sizes. Formulas about the fill factor and the overlay factor are deduced. Their maximal values are presented based on the derived tangency condition. Formulas for the point spread function (PSF) and the modulation transfer function (MTF) of the Golay9 MMT are also deduced. Two Golay9 MMT have been developed by Zemax simulation. Their PSF, MTF, fill factors, and overlay factors prove that our theoretical results are consistent with the practical simulation ones.

  17. Secret Forwarding of Events over Distributed Publish/Subscribe Overlay Network.

    PubMed

    Yoon, Young; Kim, Beom Heyn

    2016-01-01

    Publish/subscribe is a communication paradigm where loosely-coupled clients communicate in an asynchronous fashion. Publish/subscribe supports the flexible development of large-scale, event-driven and ubiquitous systems. Publish/subscribe is prevalent in a number of application domains such as social networking, distributed business processes and real-time mission-critical systems. Many publish/subscribe applications are sensitive to message loss and violation of privacy. To overcome such issues, we propose a novel method of using secret sharing and replication techniques. This is to reliably and confidentially deliver decryption keys along with encrypted publications even under the presence of several Byzantine brokers across publish/subscribe overlay networks. We also propose a framework for dynamically and strategically allocating broker replicas based on flexibly definable criteria for reliability and performance. Moreover, a thorough evaluation is done through a case study on social networks using the real trace of interactions among Facebook users.

  18. Secret Forwarding of Events over Distributed Publish/Subscribe Overlay Network

    PubMed Central

    Kim, Beom Heyn

    2016-01-01

    Publish/subscribe is a communication paradigm where loosely-coupled clients communicate in an asynchronous fashion. Publish/subscribe supports the flexible development of large-scale, event-driven and ubiquitous systems. Publish/subscribe is prevalent in a number of application domains such as social networking, distributed business processes and real-time mission-critical systems. Many publish/subscribe applications are sensitive to message loss and violation of privacy. To overcome such issues, we propose a novel method of using secret sharing and replication techniques. This is to reliably and confidentially deliver decryption keys along with encrypted publications even under the presence of several Byzantine brokers across publish/subscribe overlay networks. We also propose a framework for dynamically and strategically allocating broker replicas based on flexibly definable criteria for reliability and performance. Moreover, a thorough evaluation is done through a case study on social networks using the real trace of interactions among Facebook users. PMID:27367610

  19. Prosthodontic management of segmental mandibulectomy patient with guidance appliance and overlay denture.

    PubMed

    Aruna, U; Thulasingam, C

    2013-12-01

    Patients who undergo segmental or hemi-mandibulectomy suffer from various postoperative problems in esthetics and function. The solution to such problem is providing a mandibular guidance appliance to correct mandibular deviation to resected side due to loss of muscle action on the affected side. This article describes the treatment of a female patient who underwent segmental mandibulectomy on right side secondary to adenoid cystic carcinoma of the base of tongue. An acrylic guidance appliance was constructed to help control the mandibular deviation and co-ordinate masticatory movements. The prosthesis was worn continuously by the patient for 1 month which corrected the occlusion on the left side. To compensate for the open-bite caused due to rotation of mandible following partial mandibulectomy, an overlay removable partial denture was given. The patient was satisfied with the improvement in esthetics and mastication.

  20. Dynamics of photogenerated holes in surface modified α-Fe2O3 photoanodes for solar water splitting

    PubMed Central

    Barroso, Monica; Mesa, Camilo A.; Pendlebury, Stephanie R.; Cowan, Alexander J.; Hisatomi, Takashi; Sivula, Kevin; Grätzel, Michael; Klug, David R.; Durrant, James R.

    2012-01-01

    This paper addresses the origin of the decrease in the external electrical bias required for water photoelectrolysis with hematite photoanodes, observed following surface treatments of such electrodes. We consider two alternative surface modifications: a cobalt oxo/hydroxo-based (CoOx) overlayer, reported previously to function as an efficient water oxidation electrocatalyst, and a Ga2O3 overlayer, reported to passivate hematite surface states. Transient absorption studies of these composite electrodes under applied bias showed that the cathodic shift of the photocurrent onset observed after each of the surface modifications is accompanied by a similar cathodic shift of the appearance of long-lived hematite photoholes, due to a retardation of electron/hole recombination. The origin of the slower electron/hole recombination is assigned primarily to enhanced electron depletion in the Fe2O3 for a given applied bias. PMID:22802673

Top