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Sample records for electromechanical systems mems

  1. Micro electromechanical systems (MEMS) for mechanical engineers

    SciTech Connect

    Lee, A. P., LLNL

    1996-11-18

    The ongoing advances in Microelectromechanical Systems (MEMS) are providing man-kind the freedom to travel to dimensional spaces never before conceivable. Advances include new fabrication processes, new materials, tailored modeling tools, new fabrication machines, systems integration, and more detailed studies of physics and surface chemistry as applied to the micro scale. In the ten years since its inauguration, MEMS technology is penetrating industries of automobile, healthcare, biotechnology, sports/entertainment, measurement systems, data storage, photonics/optics, computer, aerospace, precision instruments/robotics, and environment monitoring. It is projected that by the turn of the century, MEMS will impact every individual in the industrial world, totaling sales up to $14 billion (source: System Planning Corp.). MEMS programs in major universities have spawned up all over the United States, preparing the brain-power and expertise for the next wave of MEMS breakthroughs. It should be pointed out that although MEMS has been initiated by electrical engineering researchers through the involvement of IC fabrication techniques, today it has evolved such that it requires a totally multi-disciplinary team to develop useful devices. Mechanical engineers are especially crucial to the success of MEMS development, since 90% of the physical realm involved is mechanical. Mechanical engineers are needed for the design of MEMS, the analysis of the mechanical system, the design of testing apparatus, the implementation of analytical tools, and the packaging process. Every single aspect of mechanical engineering is being utilized in the MEMS field today, however, the impact could be more substantial if more mechanical engineers are involved in the systems level designing. In this paper, an attempt is made to create the pathways for a mechanical engineer to enter in the MEMS field. Examples of application in optics and medical devices will be used to illustrate how mechanical

  2. Micro Electro-Mechanical System (MEMS) Pressure Sensor for Footwear

    DOEpatents

    Kholwadwala, Deepesh K.; Rohrer, Brandon R.; Spletzer, Barry L.; Galambos, Paul C.; Wheeler, Jason W.; Hobart, Clinton G.; Givler, Richard C.

    2008-09-23

    Footwear comprises a sole and a plurality of sealed cavities contained within the sole. The sealed cavities can be incorporated as deformable containers within an elastic medium, comprising the sole. A plurality of micro electro-mechanical system (MEMS) pressure sensors are respectively contained within the sealed cavity plurality, and can be adapted to measure static and dynamic pressure within each of the sealed cavities. The pressure measurements can provide information relating to the contact pressure distribution between the sole of the footwear and the wearer's environment.

  3. Development of micro-electromechanical system (MEMS) cochlear biomodel

    NASA Astrophysics Data System (ADS)

    Ngelayang, Thailis Bounya Anak; Latif, Rhonira

    2015-05-01

    Human cochlear is undeniably one of the most amazing organs in human body. The functional mechanism is very unique in terms of its ability to convert the sound waves in the form of mechanical vibrations into the electrical nerve impulses. It is known that the normal human auditory system can perceive the audible frequency range between 20 Hz to 20 kHz. Scientists have conducted several researches trying to build the artificial basilar membrane in the human cochlea (cochlear biomodel). Micro-electromechanical system (MEMS) is one of the potential inventions that have the ability to mimic the active behavior of the basilar membrane. In this paper, an array of MEMS bridge beams that are mechanically sensitive to the perceived audible frequency has been proposed. An array of bridge bridge beams with 0.5 µm thickness and length varying from 200 µm to 2000 µm have been designed operate within the audible frequency range. In the bridge beams design, aluminium (Al), copper (Cu), tantalum (Ta) and platinum (Pt) have considered as the material for the bridge beam structure. From the finite element (FE) and lumped element (LE) models of the MEMS bridge beams, platinum has been found to be the best material for the cochlear biomodel design, closely mimicking the basilar membrane.

  4. Development of micro-electromechanical system (MEMS) cochlear biomodel

    SciTech Connect

    Ngelayang, Thailis Bounya Anak; Latif, Rhonira

    2015-05-15

    Human cochlear is undeniably one of the most amazing organs in human body. The functional mechanism is very unique in terms of its ability to convert the sound waves in the form of mechanical vibrations into the electrical nerve impulses. It is known that the normal human auditory system can perceive the audible frequency range between 20 Hz to 20 kHz. Scientists have conducted several researches trying to build the artificial basilar membrane in the human cochlea (cochlear biomodel). Micro-electromechanical system (MEMS) is one of the potential inventions that have the ability to mimic the active behavior of the basilar membrane. In this paper, an array of MEMS bridge beams that are mechanically sensitive to the perceived audible frequency has been proposed. An array of bridge bridge beams with 0.5 µm thickness and length varying from 200 µm to 2000 µm have been designed operate within the audible frequency range. In the bridge beams design, aluminium (Al), copper (Cu), tantalum (Ta) and platinum (Pt) have considered as the material for the bridge beam structure. From the finite element (FE) and lumped element (LE) models of the MEMS bridge beams, platinum has been found to be the best material for the cochlear biomodel design, closely mimicking the basilar membrane.

  5. Controlling Micro ElectroMechanical Systems (MEMS) in Space

    NASA Astrophysics Data System (ADS)

    Farrar, D.; Schneider, W.; Osiander, R.; Champion, J. L.; Darrin, A. G.; Douglas, D.; Swanson, T. D.

    2003-01-01

    Small spacecraft, including micro and nanosats, as they are envisioned for future missions, will require an alternative means to achieve thermal control due to their small power and mass budgets. One of the proposed alternatives is Variable Emittance (Vari-E) Coatings for spacecraft radiators. Space Technology-5 (ST-5) is a technology demonstration mission through NASA Goddard Space Flight Center (GSFC) that will utilize Vari-E Coatings. This mission involves a constellation of three (3) satellites in a highly elliptical orbit with a perigee altitude of ~200 km and an apogee of ~38,000 km. Such an environment will expose the spacecraft to a wide swing in the thermal and radiation environment of the earth's atmosphere. There are three (3) different technologies associated with this mission. The three technologies are electrophoretic, electrochromic, and Micro ElectroMechanical Systems (MEMS). The ultimate goal is to make use of Vari-E coatings, in order to achieve various levels of thermal control. The focus of this paper is to highlight the Vari-E Coating MEMS instrument, with an emphasis on the Electronic Control Unit responsible for operating the MEMS device. The Test & Evaluation approach, along with the results, is specific for application on ST-5, yet the information provides a guideline for future experiments and/or thermal applications on the exterior structure of a spacecraft.

  6. Micro Electromechanical Systems (MEMS) Based Microfluidic Devices for Biomedical Applications

    PubMed Central

    Ashraf, Muhammad Waseem; Tayyaba, Shahzadi; Afzulpurkar, Nitin

    2011-01-01

    Micro Electromechanical Systems (MEMS) based microfluidic devices have gained popularity in biomedicine field over the last few years. In this paper, a comprehensive overview of microfluidic devices such as micropumps and microneedles has been presented for biomedical applications. The aim of this paper is to present the major features and issues related to micropumps and microneedles, e.g., working principles, actuation methods, fabrication techniques, construction, performance parameters, failure analysis, testing, safety issues, applications, commercialization issues and future prospects. Based on the actuation mechanisms, the micropumps are classified into two main types, i.e., mechanical and non-mechanical micropumps. Microneedles can be categorized according to their structure, fabrication process, material, overall shape, tip shape, size, array density and application. The presented literature review on micropumps and microneedles will provide comprehensive information for researchers working on design and development of microfluidic devices for biomedical applications. PMID:21747700

  7. Simulation of Micro-electromechanical Systems (MEMS) for the Next Generation Space Telescope

    NASA Astrophysics Data System (ADS)

    Kuhn, J. L.; Barclay, R. B.; Dutta, S. B.; Freund, M. M.; Greenhouse, M. A.; Moseley, S. H.

    2000-12-01

    The NASA Goddard Space Flight Center (GSFC) is developing optical micro-electromechanical system (MEMS) components for potential application in Next Generation Space Telescope (NGST) science instruments. In this work, we present an overview of the electro-mechanical simulation of three MEMS components for NGST, which include a reflective micro-mirror array and transmissive microshutter array for aperture control for a near infrared (NIR) multi-object spectrometer and a large aperture MEMS Fabry-Perot tunable filter for a NIR wide field camera. In all cases the device must operate at cryogenic temperatures with low power consumption and low, CMOS compatible, voltages. The goal of our simulation efforts is to adaquately predict both the performance and the reliability of the devices during ground handling, launch, and operation to prevent failures late in the development process and during flight. This goal requires detailed modeling and validation of complex electro-thermal-mechanical interactions and very large non-linear deformations, often involving surface contact. Various parameters such as spatial dimensions and device response are often difficult to measure reliably at these small scales. In addition, these devices are fabricated from a wide variety of materials including surface micro-machined aluminum, reactive ion etched (RIE) silicon nitride, and deep reactive ion etched (DRIE) bulk single crystal silicon. The above broad set of conditions combine to be a formidable challenge for space flight qualification analysis. These simulations represent NASA/GSFC's first attempts at implementing a comprehensive strategy to address complex MEMS structures.

  8. Fast Simulating High Order Models Application to Micro Electro-Mechanical Systems (MEMS)

    SciTech Connect

    Yacine, Z.; Benfdila, A.; Djennoune, S.

    2009-03-05

    The approximation of high order systems by low order models is one of the important problems in system theory. The use of a reduced order model makes it easier to implement analysis, simulations and control system designs. Numerous methods are available in the literature for order reduction of linear continuous systems in time domain as well as in frequency domain. But, this is not the case for non linear systems. The well known Trajectory Piece-Wise Linear approach (TPWL) elaborated to nonlinear model order reduction guarantees a simplification and an accurate representation of the behaviour of strongly non linear systems handling local and global approximation. The present attempt is towards evolving an improvement for the TPWL order reduction technique, which ensures a good quality of approximation combining the advantages of the Krylov subspaces method and the local linearization. We illustrate the technique on a MEMS circuit (Micro Electro-Mechanical System)

  9. Radio Frequency (RF) Micro-Electromechanical Systems (MEMS) Switches for Space Communications

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.; Ponchak, George E.; Scardelletti, Maximillian C.; Varaljay, Nicholas C.

    2000-01-01

    Micro-electromechanical systems (MEMS) is an emerging technology for radio frequency (RF) systems because it has the potential to dramatically decrease loss and improve efficiency. In this paper, we address the design and fabrication of novel MEMS switches being developed at NASA Glenn Research Center. Two types of switches are being developed: a microstrip series single pole single throw (SPST) switch and a coplanar waveguide (CPW) series SPST and single pole double throw (SPDT) switches. These are being fabricated as an integral part of 50 Ohm microstrip and CPW RF integrated circuits using microfabrication techniques. The construction of the switch relies on a cantilever beam that is partially supported by a dielectric post. The cantilever beam is electro-magnetically actuated. To decrease stiction, a Si3N4 thin film is deposited over the contact area. Thus, when the switch is closed, the ON-state insertion loss is governed by the parallel plate capacitance formed by the two contacts. The isolation in the OFF-state is governed by the parasitic capacitance when the cantilever is in the up position. RF MEMS switches have been demonstrated with 80% lower insertion loss than conventional solid state devices (GaAs Metal Semiconductor Field Effect Transistors (MESFETs) and Silicon PIN diodes) based switches. For example, a conventional GaAs five-bit phase shifter which is required for beam steering in a phased array antenna has approximately 7 dB of insertion loss at 26.5 GHz where as a comparable MEMS based phase shifter is expected to have only 2 dB of insertion loss. This translates into 56% lower power dissipation and therefore decreases the thermal load on the spacecraft and also reduces the power amplifier requirements. These benefits will enable NASA to build the next generation of deep space science crafts and micro/nano satellites.

  10. Novel Micro ElectroMechanical Systems (MEMS) Packaging for the Skin of the Satellite

    NASA Technical Reports Server (NTRS)

    Darrin, M. Ann; Osiander, Robert; Lehtonen, John; Farrar, Dawnielle; Douglas, Donya; Swanson, Ted

    2004-01-01

    This paper includes a discussion of the novel packaging techniques that are needed to place MEMS based thermal control devices on the skin of various satellites, eliminating the concern associated with potential particulates &om integration and test or the launch environment. Protection of this MEMS based thermal device is achieved using a novel polymer that is both IR transmissive and electrically conductive. This polymer was originally developed and qualified for space flight application by NASA at the Langley Research Center. The polymer material, commercially known as CPI, is coated with a thin layer of ITO and sandwiched between two window-like frames. The packaging of the MEMS based radiator assembly offers the benefits of micro-scale devices in a chip on board fashion, with the level of protection generally found in packaged parts.

  11. Of magnetic imaging system experiments and micro electro-mechanical systems "of mise and MEMS"

    NASA Astrophysics Data System (ADS)

    Patterson, William C.

    Magnetic fields can occur over an extremely broad range of amplitudes, and spatial and temporal scales. Practical scientific and engineering systems have fields ranging in strength from pico-tesla to hundreds of tesla. Furthermore, spatial variations can range in scale from nanometers to tens of meters, and temporal variations can range from picoseconds to hours. Due to these large variations, many different devices and methods have been previously designed for measuring and mapping magnetic fields. The primary application area for the systems developed here is magnetic microsystems. Such systems make use of one or more microscale electromagnets, soft magnets, and/or permanent magnets for sensors, actuators, inductors, electronics, biomedical devices, etc. A single magnet dimension may range from one mum to hundreds of mum, and the overall area of interest may span over distances of millimeters to centimeters. To map the stray fields from such structures, a field measurement tool must be capable of measuring fields ranging from mT to T, while mapping over distances of millimeters with a spatial resolution of approximately one mum. This current study is focused only on static fields, but time-varying fields are of great interest and could be addressed in further research. This research focuses on the development of two tools that meet the requirements of microscale magnetic measurements. The first tool is based on an optical method and excels at extremely rapid measurements of large spatial regions. The second tool is a raster based system that focuses on high magnetic and spatial accuracy. The optical system quantitatively maps the stray magnetic fields of microscale magnetic structures with field resolution down to 50 muT and spatial resolution down to 4 mum. The system uses a magneto-optical indicator film (MOIF) in conjunction with an upright reflective polarizing light microscope to generate optical images of the magnetic field perpendicular to the image plane

  12. Of magnetic imaging system experiments and micro electro-mechanical systems "of mise and MEMS"

    NASA Astrophysics Data System (ADS)

    Patterson, William C.

    Magnetic fields can occur over an extremely broad range of amplitudes, and spatial and temporal scales. Practical scientific and engineering systems have fields ranging in strength from pico-tesla to hundreds of tesla. Furthermore, spatial variations can range in scale from nanometers to tens of meters, and temporal variations can range from picoseconds to hours. Due to these large variations, many different devices and methods have been previously designed for measuring and mapping magnetic fields. The primary application area for the systems developed here is magnetic microsystems. Such systems make use of one or more microscale electromagnets, soft magnets, and/or permanent magnets for sensors, actuators, inductors, electronics, biomedical devices, etc. A single magnet dimension may range from one mum to hundreds of mum, and the overall area of interest may span over distances of millimeters to centimeters. To map the stray fields from such structures, a field measurement tool must be capable of measuring fields ranging from mT to T, while mapping over distances of millimeters with a spatial resolution of approximately one mum. This current study is focused only on static fields, but time-varying fields are of great interest and could be addressed in further research. This research focuses on the development of two tools that meet the requirements of microscale magnetic measurements. The first tool is based on an optical method and excels at extremely rapid measurements of large spatial regions. The second tool is a raster based system that focuses on high magnetic and spatial accuracy. The optical system quantitatively maps the stray magnetic fields of microscale magnetic structures with field resolution down to 50 muT and spatial resolution down to 4 mum. The system uses a magneto-optical indicator film (MOIF) in conjunction with an upright reflective polarizing light microscope to generate optical images of the magnetic field perpendicular to the image plane

  13. Flexoelectric MEMS: towards an electromechanical strain diode

    NASA Astrophysics Data System (ADS)

    Bhaskar, U. K.; Banerjee, N.; Abdollahi, A.; Solanas, E.; Rijnders, G.; Catalan, G.

    2016-01-01

    Piezoelectricity and flexoelectricity are two independent but not incompatible forms of electromechanical response exhibited by nanoscale ferroelectrics. Here, we show that flexoelectricity can either enhance or suppress the piezoelectric response of the cantilever depending on the ferroelectric polarity and lead to a diode-like asymmetric (two-state) electromechanical response.Piezoelectricity and flexoelectricity are two independent but not incompatible forms of electromechanical response exhibited by nanoscale ferroelectrics. Here, we show that flexoelectricity can either enhance or suppress the piezoelectric response of the cantilever depending on the ferroelectric polarity and lead to a diode-like asymmetric (two-state) electromechanical response. Electronic supplementary information (ESI) available. See DOI: 10.1039/c5nr06514c

  14. Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)

    PubMed Central

    Birkholz, M.; Ehwald, K.-E.; Basmer, T.; Kulse, P.; Reich, C.; Drews, J.; Genschow, D.; Haak, U.; Marschmeyer, S.; Matthus, E.; Schulz, K.; Wolansky, D.; Winkler, W.; Guschauski, T.; Ehwald, R.

    2013-01-01

    The progressive scaling in semiconductor technology allows for advanced miniaturization of intelligent systems like implantable biosensors for low-molecular weight analytes. A most relevant application would be the monitoring of glucose in diabetic patients, since no commercial solution is available yet for the continuous and drift-free monitoring of blood sugar levels. We report on a biosensor chip that operates via the binding competition of glucose and dextran to concanavalin A. The sensor is prepared as a fully embedded micro-electromechanical system and operates at GHz frequencies. Glucose concentrations derive from the assay viscosity as determined by the deflection of a 50 nm TiN actuator beam excited by quasi-electrostatic attraction. The GHz detection scheme does not rely on the resonant oscillation of the actuator and safely operates in fluidic environments. This property favorably combines with additional characteristics—(i) measurement times of less than a second, (ii) usage of biocompatible TiN for bio-milieu exposed parts, and (iii) small volume of less than 1 mm3—to qualify the sensor chip as key component in a continuous glucose monitor for the interstitial tissue. PMID:25332510

  15. Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)

    NASA Astrophysics Data System (ADS)

    Birkholz, M.; Ehwald, K.-E.; Basmer, T.; Kulse, P.; Reich, C.; Drews, J.; Genschow, D.; Haak, U.; Marschmeyer, S.; Matthus, E.; Schulz, K.; Wolansky, D.; Winkler, W.; Guschauski, T.; Ehwald, R.

    2013-06-01

    The progressive scaling in semiconductor technology allows for advanced miniaturization of intelligent systems like implantable biosensors for low-molecular weight analytes. A most relevant application would be the monitoring of glucose in diabetic patients, since no commercial solution is available yet for the continuous and drift-free monitoring of blood sugar levels. We report on a biosensor chip that operates via the binding competition of glucose and dextran to concanavalin A. The sensor is prepared as a fully embedded micro-electromechanical system and operates at GHz frequencies. Glucose concentrations derive from the assay viscosity as determined by the deflection of a 50 nm TiN actuator beam excited by quasi-electrostatic attraction. The GHz detection scheme does not rely on the resonant oscillation of the actuator and safely operates in fluidic environments. This property favorably combines with additional characteristics—(i) measurement times of less than a second, (ii) usage of biocompatible TiN for bio-milieu exposed parts, and (iii) small volume of less than 1 mm3—to qualify the sensor chip as key component in a continuous glucose monitor for the interstitial tissue.

  16. Bilayer Graphene Electromechanical Systems

    NASA Astrophysics Data System (ADS)

    Champagne, Alexandre; Storms, Matthew; Yigen, Serap; Reulet, Bertrand

    Bilayer graphene is an outstanding electromechanical system, and its electronic and mechanical properties, as well as their coupling, are widely tunable. To the best of our knowledge, simultaneous charge transport and mechanical spectroscopy (via RF mixing) has not been realized in bilayer graphene. We present data showing clear electromechanical resonances in three suspended bilayer devices whose length range from 1 to 2 microns. We first describe the low-temperature current annealing of the devices which is crucial to achieve the transconductance, I -VG , necessary to implement a RF mixing detection method. We describe our RF mixing circuit and data. We measure clear mechanical resonances ranging in frequency from 50 to 140 MHz. We show that we can smoothly tune the resonance frequencies of our bilayer resonators with mechanical strain applied via a backgate voltage. We measure quality factors up to 4000. We briefly discuss the effects of the RF driving power on the dispersion of the mechanical resonance. We aim to use these high quality mechanical resonance as a mechanical sensor of the bilayer quantum Hall phase transitions. We show initial data of a bilayer mechanical resonance as a function of magnetic field and quantum Hall phase transitions.

  17. Design and fabrication of a flexible MEMS-based electromechanical sensor array for breast cancer diagnosis

    PubMed Central

    Pandya, Hardik J.; Park, Kihan; Desai, Jaydev P.

    2015-01-01

    The use of flexible micro-electro-mechanical systems (MEMS) based device provides a unique opportunity in bio-medical robotics such as characterization of normal and malignant tissues. This paper reports on design and development of a flexible MEMS-based sensor array integrating mechanical and electrical sensors on the same platform to enable the study of the change in electro-mechanical properties of the benign and cancerous breast tissues. In this work, we present the analysis for the electrical characterization of the tissue specimens and also demonstrate the feasibility of using the sensor for mechanical characterization of the tissue specimens. Eight strain gauges acting as mechanical sensors were fabricated using poly(3,4-ethylenedioxythiophene) poly(styrenesulfonate) (PEDOT:PSS) conducting polymer on poly(dimethylsiloxane) (PDMS) as the substrate material. Eight electrical sensors were fabricated using SU-8 pillars on gold (Au) pads which were patterned on the strain gauges separated by a thin insulator (SiO2 1.0μm). These pillars were coated with gold to make it conducting. The electromechanical sensors are integrated on the same substrate. The sensor array covers 180μm × 180μm area and the size of the complete device is 20mm in diameter. The diameter of each breast tissue core used in the present study was 1mm and the thickness was 8μm. The region of interest was 200μm × 200μm. Microindentation technique was used to characterize the mechanical properties of the breast tissues. The sensor is integrated with conducting SU-8 pillars to study the electrical property of the tissue. Through electro-mechanical characterization studies using this MEMS-based sensor, we were able to measure the accuracy of the fabricated device and ascertain the difference between benign and cancer breast tissue specimens. PMID:26526747

  18. Simultaneous MEMS-based electro-mechanical phenotyping of breast cancer

    PubMed Central

    Pandya, Hardik J.; Park, Kihan; Chen, Wenjin; Chekmareva, Marina A.; Foran, David J.; Desai, Jaydev P.

    2015-01-01

    Carcinomas are the most commonly diagnosed cancers originating in the skin, lungs, breasts, pancreas, and other organs and glands. In most of the cases, the microenvironment within the tissue changes with the progression of disease. A key challenge is to develop a device capable of providing quantitative indicators in diagnosing cancer by measuring alteration in electrical and mechanical property of the tissues from the onset of malignancy. We demonstrate micro-electro-mechanical-systems (MEMS) based flexible polymer microsensor array capable of simultaneously measuring electro-mechanical properties of the breast tissues cores (1mm in diameter and 10μm in thickness) from onset through progression of the cancer. The electrical and mechanical signatures obtained from the tissue cores shows the capability of the device to clearly demarcate the specific stages of cancer in epithelial and stromal regions providing quantitative indicators facilitating the diagnosis of breast cancer. The present study shows that electro-mechanical properties of the breast tissue core at the micro-level are different than those at the macro-level. PMID:26224116

  19. Electromechanical propellant control system actuator

    NASA Technical Reports Server (NTRS)

    Myers, W. Neill; Weir, Rae Ann

    1990-01-01

    New control mechanism technologies are currently being sought to provide alternatives to hydraulic actuation systems. The Propulsion Laboratory at Marshall Space Flight Center (MSFC) is involved in the development of electromechanical actuators (EMA's) for this purpose. Through this effort, an in-house designed electromechanical propellant valve actuator has been assembled and is presently being evaluated. This evaluation will allow performance comparisons between EMA and hydraulics systems. The in-house design consists of the following hardware: a three-phase brushless motor, a harmonic drive, and an output spline which will mate with current Space Shuttle Main Engine (SSME) propellant control valves. A resolver and associated electronics supply position feedback for the EMA. System control is provided by a solid-state electronic controller and power supply. Frequency response testing has been performed with further testing planned as hardware and test facilities become available.

  20. MEMS in Space Systems

    NASA Technical Reports Server (NTRS)

    Lyke, J. C.; Michalicek, M. A.; Singaraju, B. K.

    1995-01-01

    Micro-electro-mechanical systems (MEMS) provide an emerging technology that has the potential for revolutionizing the way space systems are designed, assembled, and tested. The high launch costs of current space systems are a major determining factor in the amount of functionality that can be integrated in a typical space system. MEMS devices have the ability to increase the functionality of selected satellite subsystems while simultaneously decreasing spacecraft weight. The Air Force Phillips Laboratory (PL) is supporting the development of a variety of MEMS related technologies as one of several methods to reduce the weight of space systems and increase their performance. MEMS research is a natural extension of PL research objectives in micro-electronics and advanced packaging. Examples of applications that are under research include on-chip micro-coolers, micro-gyroscopes, vibration sensors, and three-dimensional packaging technologies to integrate electronics with MEMS devices. The first on-orbit space flight demonstration of these and other technologies is scheduled for next year.

  1. Automated multiscale measurement system for MEMS characterisation

    NASA Astrophysics Data System (ADS)

    Lyda, W.; Burla, A.; Haist, T.; Zimmermann, J.; Osten, W.; Sawodny, O.

    2010-05-01

    In former publications we presented an automated multiscale measurement system (AMMS) based on an adaptable active exploration strategy. The system is armed with several sensors linked by indicator algorithms to identify unresolved defects and to trigger finer resolved measurements. The advantage of this strategy in comparison to single sensor approaches is its high flexibility which is used to balance the conflict between measurement range, resolution and duration. For an initial proof of principle we used the system for inspection of microlens arrays. An even higher challenge for inspection systems are modern micro electro-mechanical systems (MEMS). MEMS consist of critical functional components which range from several millimeters down to micrometers and typically have tolerances in sub-micron scale. This contribution is focused on the inspection of MEMS using the example of micro calibration devices. This new class of objects has completely different surface characteristics and features hence it is necessary to adapted the components of the AMMS. Typical defects found on calibration devices are for example broken actuator combs and springs, surface cracks or missing features. These defects have less influence on the optical properties of the surface and the MEMS surface generates more complex intensity distributions in comparison microlense arrays. At the same time, the surface features of the MEMS have a higher variety and less periodicity which reduce the performance of currently used algorithms. To meet these requirements, we present new indicator algorithms for the automated analysis of confocal as well as conventional imaging data and show initial multiscale inspection results.

  2. Electro-mechanical propulsion system

    SciTech Connect

    Stewart, C.F.; Stewart, J.K.

    1984-04-24

    An Electro-Mechanical Propulsion System for vehicles, wherein the prime mover, such as an internal combustion engine, drives an alternating voltage generator through a first shaft at a constant RPM controlled by a speed governor; and wherein the alternating voltage generator serves as a source of energy for an electrical energy conversion unit comprising a controlled rectifier, a polyphase signal generator, an analog control unit, and a regulated DC power supply, to further provide a variable power and frequency source for an AC traction motor coupled through a second shaft to the vehicle wheel drive system. Operator manual or pedal control of the system is further provided by a speed control potentiometer, An acceleration control potentiometer, and a torque control potentiometer.

  3. Revolution of Sensors in Micro-Electromechanical Systems

    NASA Astrophysics Data System (ADS)

    Esashi, Masayoshi

    2012-08-01

    Microsensors realized by micro-electromechanical systems (MEMS) technology play a key role as the input devices of systems. In this report, the following sensors are reviewed: piezoresistive and capacitive pressure sensors, surface acoustic wave (SAW) wireless pressure sensors, tactile sensor networks for robots, accelerometers, angular velocity sensors (gyroscopes), range image sensors using optical scanners, infrared imagers, chemical sensing systems as Fourier transform infrared (FTIR) spectroscopy and gas chromatography, flow sensors for fluids, and medical sensors such as ultrafine optical-fiber blood pressure sensors and implantable pressure sensors.

  4. Six-Message Electromechanical Display System

    NASA Technical Reports Server (NTRS)

    Howard, Richard T.

    2007-01-01

    A proposed electromechanical display system would be capable of presenting as many as six distinct messages. In the proposed system, each display element would include a cylinder having a regular hexagonal cross section.

  5. Design and fabrication of a flexible MEMS-based electro-mechanical sensor array for breast cancer diagnosis

    NASA Astrophysics Data System (ADS)

    Pandya, Hardik J.; Park, Kihan; Desai, Jaydev P.

    2015-07-01

    The use of flexible micro-electro-mechanical systems (MEMS)-based devices provides a unique opportunity in bio-medical robotics such as the characterization of normal and malignant tissues. This paper reports on the design and development of a flexible MEMS-based sensor array integrating mechanical and electrical sensors on the same platform to enable the study of the change in electro-mechanical properties of benign and cancerous breast tissues. In this work, we present the analysis of the electrical characterization of the tissue specimens and also demonstrate the feasibility of using the sensor for the mechanical characterization of tissue specimens. Eight strain gauges acting as mechanical sensors were fabricated using poly(3,4-ethylenedioxythiophene) poly(styrenesulfonate) (PEDOT:PSS) conducting polymer on poly(dimethylsiloxane) (PDMS) as the substrate material. Eight electrical sensors were fabricated using SU-8 pillars on gold (Au) pads which were patterned on the strain gauges separated by a thin insulator (SiO2 1.0 μm). These pillars were coated with gold to make them conducting. The electro-mechanical sensors are integrated on the same substrate. The sensor array covers a 180 μm  ×  180 μm area and the size of the complete device is 20 mm in diameter. The diameter of each breast tissue core used in the present study was 1 mm and the thickness was 8 μm. The region of interest was 200 μm  ×  200 μm. A microindentation technique was used to characterize the mechanical properties of the breast tissues. The sensor is integrated with conducting SU-8 pillars to study the electrical property of the tissue. Through electro-mechanical characterization studies using this MEMS-based sensor, we were able to measure the accuracy of the fabricated device and ascertain the difference between benign and cancers breast tissue specimens.

  6. MEMS: Enabled Drug Delivery Systems.

    PubMed

    Cobo, Angelica; Sheybani, Roya; Meng, Ellis

    2015-05-01

    Drug delivery systems play a crucial role in the treatment and management of medical conditions. Microelectromechanical systems (MEMS) technologies have allowed the development of advanced miniaturized devices for medical and biological applications. This Review presents the use of MEMS technologies to produce drug delivery devices detailing the delivery mechanisms, device formats employed, and various biomedical applications. The integration of dosing control systems, examples of commercially available microtechnology-enabled drug delivery devices, remaining challenges, and future outlook are also discussed.

  7. Ovenized microelectromechanical system (MEMS) resonator

    SciTech Connect

    Olsson, Roy H; Wojciechowski, Kenneth; Kim, Bongsang

    2014-03-11

    An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.

  8. Advanced MEMS systems for optical communication and imaging

    NASA Astrophysics Data System (ADS)

    Horenstein, M. N.; Stewart, J. B.; Cornelissen, S.; Sumner, R.; Freedman, D. S.; Datta, M.; Kani, N.; Miller, P.

    2011-06-01

    Optical communication and adaptive optics have emerged as two important uses of micro-electromechanical (MEMS) devices based on electrostatic actuation. Each application uses a mirror whose surface is altered by applying voltages of up to 300 V. Previous generations of adaptive-optic mirrors were large (~1 m) and required the use of piezoelectric transducers. Beginning in the mid-1990s, a new class of small MEMS mirrors (~1 cm) were developed. These mirrors are now a commercially available, mature technology. This paper describes three advanced applications of MEMS mirrors. The first is a mirror used for corona-graphic imaging, whereby an interferometric telescope blocks the direct light from a distant star so that nearby objects such as planets can be seen. We have developed a key component of the system: a 144-channel, fully-scalable, high-voltage multiplexer that reduces power consumption to only a few hundred milliwatts. In a second application, a MEMS mirror comprises part of a two-way optical communication system in which only one node emits a laser beam. The other node is passive, incorporating a retro-reflective, electrostatic MEMS mirror that digitally encodes the reflected beam. In a third application, the short (~100-ns) pulses of a commercially-available laser rangefinder are returned by the MEMS mirror as a digital data stream. Suitable low-power drive systems comprise part of the system design.

  9. Mechanical properties of polymer/carbon nanotube composite micro-electromechanical systems bridges

    NASA Astrophysics Data System (ADS)

    Sousa, P. M.; Chu, V.; Conde, J. P.

    2013-04-01

    Microelectromechanical systems with all-polymer structural layers are expected to allow novel MEMS applications due to their mechanical, optical, electronic, and chemical properties, which are tunable and distinct from the standard inorganic layers currently used. The mechanical properties of micro-electromechanical bridge resonators (pMEMS) based on a polymer/carbon-nanotubes (CNT) composite structural material are presented. The structural material of the electrostatically actuated pMEMS microresonators are multilayers of a conductive polymer based on poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) to which carboxylated multi-wall CNTs monolayers are electrostatically attached after surface functionalization. The effects of measurement pressure, temperature, and applied load on the resonance frequency and on the quality factor, Q, of the pMEMS are studied. The long term reliability of the pMEMS resonators is also investigated, and the resonators were subjected to above 1011 actuation cycles without significant performance deterioration. The mechanical properties of the pMEMS are systematically compared to those of a doped hydrogenated amorphous silicon (n+-a-Si:H) MEMS. While the CNT multilayers increase the rigidity (and hence the resonance frequency) as well as the electrical conductivity of the structural layer, they decrease the energy dissipation (and hence increase Q). Changes in CNT-polymer matrix adhesion result in reversible changes of the resonator properties during operation, requiring monitoring and control.

  10. MEMS device for spacecraft thermal control applications

    NASA Technical Reports Server (NTRS)

    Swanson, Theordore D. (Inventor)

    2003-01-01

    A micro-electromechanical device that comprises miniaturized mechanical louvers, referred to as Micro Electro-Mechanical Systems (MEMS) louvers are employed to achieve a thermal control function for spacecraft and instruments. The MEMS louvers are another form of a variable emittance control coating and employ micro-electromechanical technology. In a function similar to traditional, macroscopic thermal louvers, the MEMS louvers of the present invention change the emissivity of a surface. With the MEMS louvers, as with the traditional macroscopic louvers, a mechanical vane or window is opened and closed to allow an alterable radiative view to space.

  11. Hybrid electromechanical actuator and actuation system

    NASA Technical Reports Server (NTRS)

    Su, Ji (Inventor); Xu, Tian-Bing (Inventor)

    2008-01-01

    A hybrid electromechanical actuator has two different types of electromechanical elements, one that expands in a transverse direction when electric power is applied thereto and one that contracts in a transverse direction when electric power is applied thereto. The two electromechanical elements are (i) disposed in relation to one another such that the transverse directions thereof are parallel to one another, and (ii) mechanically coupled to one another at least at two opposing edges thereof. Electric power is applied simultaneously to the elements.

  12. Electromechanical transducer for acoustic telemetry system

    DOEpatents

    Drumheller, Douglas S.

    1993-01-01

    An improved electromechanical transducer is provided for use in an acoustic telemetry system. The transducer of this invention comprises a stack of ferroelectric ceramic disks interleaved with a plurality of spaced electrodes which are used to electrically pole the ceramic disks. The ceramic stack is housed in a metal tubular drill collar segment. The electrodes are preferably alternatively connected to ground potential and driving potential. This alternating connection of electrodes to ground and driving potential subjects each disk to an equal electric field; and the direction of the field alternates to match the alternating direction of polarization of the ceramic disks. Preferably, a thin metal foil is sandwiched between electrodes to facilitate the electrical connection. Alternatively, a thicker metal spacer plate is selectively used in place of the metal foil in order to promote thermal cooling of the ceramic stack.

  13. Electromechanical transducer for acoustic telemetry system

    DOEpatents

    Drumheller, D.S.

    1993-06-22

    An improved electromechanical transducer is provided for use in an acoustic telemetry system. The transducer of this invention comprises a stack of ferroelectric ceramic disks interleaved with a plurality of spaced electrodes which are used to electrically pole the ceramic disks. The ceramic stack is housed in a metal tubular drill collar segment. The electrodes are preferably alternatively connected to ground potential and driving potential. This alternating connection of electrodes to ground and driving potential subjects each disk to an equal electric field; and the direction of the field alternates to match the alternating direction of polarization of the ceramic disks. Preferably, a thin metal foil is sandwiched between electrodes to facilitate the electrical connection. Alternatively, a thicker metal spacer plate is selectively used in place of the metal foil in order to promote thermal cooling of the ceramic stack.

  14. Flywheel energy storage for electromechanical actuation systems

    NASA Technical Reports Server (NTRS)

    Hockney, Richard L.; Goldie, James H.; Kirtley, James L.

    1991-01-01

    The authors describe a flywheel energy storage system designed specifically to provide load-leveling for a thrust vector control (TVC) system using electromechanical actuators (EMAs). One of the major advantages of an EMA system over a hydraulic system is the significant reduction in total energy consumed during the launch profile. Realization of this energy reduction will, however, require localized energy storage capable of delivering the peak power required by the EMAs. A combined flywheel-motor/generator unit which interfaces directly to the 20-kHz power bus represents an ideal candidate for this load leveling. The overall objective is the definition of a flywheel energy storage system for this application. The authors discuss progress on four technical objectives: (1) definition of the specifications for the flywheel-motor/generator system, including system-level trade-off analysis; (2) design of the flywheel rotor; (3) design of the motor/generator; and (4) determination of the configuration for the power management system.

  15. Superconducting circuitry for quantum electromechanical systems

    NASA Astrophysics Data System (ADS)

    LaHaye, Matthew D.; Rouxinol, Francisco; Hao, Yu; Shim, Seung-Bo; Irish, Elinor K.

    2015-05-01

    Superconducting systems have a long history of use in experiments that push the frontiers of mechanical sensing. This includes both applied and fundamental research, which at present day ranges from quantum computing research and e orts to explore Planck-scale physics to fundamental studies on the nature of motion and the quantum limits on our ability to measure it. In this paper, we first provide a short history of the role of superconducting circuitry and devices in mechanical sensing, focusing primarily on efforts in the last decade to push the study of quantum mechanics to include motion on the scale of human-made structures. This background sets the stage for the remainder of the paper, which focuses on the development of quantum electromechanical systems (QEMS) that incorporate superconducting quantum bits (qubits), superconducting transmission line resonators and flexural nanomechanical elements. In addition to providing the motivation and relevant background on the physical behavior of these systems, we discuss our recent efforts to develop a particular type of QEMS that is based upon the Cooper-pair box (CPB) and superconducting coplanar waveguide (CPW) cavities, a system which has the potential to serve as a testbed for studying the quantum properties of motion in engineered systems.

  16. Designing Piezoelectric Films for Micro Electromechanical Systems

    SciTech Connect

    Trolier-McKinstry, Susan; Griggio, Flavio; Yaeger, Charles; Jousse, Pierre; Zhao, Dalong; Bharadwaja, Srowthi; Jackson, Thomas N; Jesse, Stephen; Kalinin, Sergei V; Wasa, Kiyotaka

    2011-01-01

    Piezoelectric thin films are of increasing interest in low-voltage micro electromechanical systems for sensing, actuation, and energy harvesting. They also serve as model systems to study fundamental behavior in piezoelectrics. Next-generation technologies such as ultrasound pill cameras, flexible ultrasound arrays, and energy harvesting systems for unattended wireless sensors will all benefit from improvements in the piezoelectric properties of the films. This paper describes tailoring the composition, microstructure, orientation of thin films, and substrate choice to optimize the response. It is shown that increases in the grain size of lead-based perovskite films from 75 to 300 nm results in 40 and 20% increases in the permittivity and piezoelectric coefficients, respectively. This is accompanied by an increase in the nonlinearity in the response. Band excitation piezoresponse force microscopy was used to interrogate the nonlinearity locally. It was found that chemical solution-derived PbZr(0.52)Ti(0.48)O(3) thin films show clusters of larger nonlinear response embedded in a more weakly nonlinear matrix. The scale of the clusters significantly exceeds that of the grain size, suggesting that collective motion of many domain walls contributes to the observed Rayleigh behavior in these films. Finally, it is shown that it is possible to increase the energy-harvesting figure of merit through appropriate materials choice, strong imprint, and composite connectivity patterns.

  17. Micro-electromechanical Systems for Probing Novel Strain Physics and Innovative Strain Devices in 2D Materials

    NASA Astrophysics Data System (ADS)

    Christopher, Jason; Vutukuru, Mounika; Bishop, David; Swan, Anna; Goldberg, Bennett

    Straining 2D materials can dramatically change electrical, thermal and optical properties and can even cause unconventional behavior such as generating pseudo-magnetic fields. However attempts at probing these effects have been hindered by the difficulty involved with precisely straining these materials. Here we present micro-electromechanical systems (MEMS) as an ideal platform for straining 2D materials because they are readily compatible with existing electronics and their size makes them compatible with 2D materials. Additionally the MEMS platform does more than facilitate experimentation; by freeing us to think of strain as dynamical it makes a whole new class of devices practical for next generation technology. To demonstrate the power of this platform we have for the first time measured the strain response of the Raman and photoluminescence spectra of suspended MoS2, and measured the friction force between MoS2 and the MEMS structure. This talk will touch on the basics of designing MEMS structures for straining 2D materials, how to transfer 2D materials onto MEMS without break either, proof of concept experimental results, and next steps in developing the MEMS platform. This work is supported by NSF DMR Grant 1411008, and author J. Christopher thanks the NDSEG program for its support.

  18. Development of cup-shaped micro-electromechanical systems-based vector hydrophone

    NASA Astrophysics Data System (ADS)

    Xu, Wei; Liu, Yuan; Zhang, Guojun; Wang, Renxin; Xue, Chenyang; Zhang, Wendong; Liu, Jun

    2016-09-01

    Similar to the vital performance factors, the receiving sensitivity and the bandwidth exist interactively in the micro-electromechanical systems (MEMS)-based vector hydrophones. Some existing methods can improve the sensitivity of the hydrophone, but these improvements are usually gained at a cost of the bandwidth. However, the cup-shaped MEMS vector hydrophone that is presented in this paper can improve its sensitivity while retaining a sufficient bandwidth. The cup-shaped structure acts as a new sensing unit in the MEMS vector hydrophone, replacing the bionic columnar hair that was previously used for sensing. The relationships between the parameters of the cup-shaped structure and the sensitivity of the vector hydrophone were determined by a theoretical deduction. In addition, simulation analyses were performed, and optimized structural parameters were obtained in this work. ANSYS 15.0 simulation was used to derive the optimum characteristics for the cup-shaped structure. The results of the calibration experiments showed that the sensitivity reached up to -188.5 dB (gain of 40 dB, 1 kHz, 0 dB@1 V/μPa), and the bandwidth was in the 20 Hz-1 kHz range, which is sufficient for an underwater acoustic detection at low frequencies. This work has, thus, proved that the cup-shaped vector hydrophone has superior properties for the engineering applications.

  19. A Variational Approach to the Analysis of Dissipative Electromechanical Systems

    PubMed Central

    Allison, Andrew; Pearce, Charles E. M.; Abbott, Derek

    2014-01-01

    We develop a method for systematically constructing Lagrangian functions for dissipative mechanical, electrical, and electromechanical systems. We derive the equations of motion for some typical electromechanical systems using deterministic principles that are strictly variational. We do not use any ad hoc features that are added on after the analysis has been completed, such as the Rayleigh dissipation function. We generalise the concept of potential, and define generalised potentials for dissipative lumped system elements. Our innovation offers a unified approach to the analysis of electromechanical systems where there are energy and power terms in both the mechanical and electrical parts of the system. Using our novel technique, we can take advantage of the analytic approach from mechanics, and we can apply these powerful analytical methods to electrical and to electromechanical systems. We can analyse systems that include non-conservative forces. Our methodology is deterministic, and does does require any special intuition, and is thus suitable for automation via a computer-based algebra package. PMID:24586221

  20. Silicon carbide technology for micro- and nano-electromechanical systems applications

    NASA Astrophysics Data System (ADS)

    Gao, Di

    Micro- and nano-electromechanical systems (MEMS and NEMS) have emerged as a technology that integrates miniaturized mechanical structures with microelectronics components mainly for sensing and actuating applications. Silicon carbide (SiC) has gained great attention as both a coating and a structural material for MEMS applications in harsh environments, due to its superior mechanical strength, chemical stability and excellent performance in high-temperature, high-power electronic components. In addition, because of its high acoustic velocity and stable physicochemical properties, SiC is recently recognized as a promising material for fabricating radio frequency (RF) MEMS used as oscillators and filters in RF signal communications. The goal of this work is to realize a manufacturable SiC technology for MEMS applications. Using a single precursor 1,3-disilabutane (1,3-DSB), we have been able to deposit polycrystalline cubic SiC films on Si and SiO2 substrates by chemical vapor deposition at relatively low temperatures ranging from 750 to 850°C. The SiC films can be in situ doped by introducing NH3 to the precursor 1,3-DSB. The electrical resistivity of SiC films is controlled by properly adjusting the flow rate ratio of NH 3 to 1,3-DSB. Electrical resistivity as low as 26 mO·cm has been achieved for as-deposited SiC films. Selective dry etch for SiC has been investigated using SF6/O 2, HBr and HBr/Cl2 transformer coupled plasmas. Nonmetallic materials including SiO2 and Si3N4 have been used as masking materials. The mechanical, electrical and chemical properties of SiC thin films are characterized using the state-of-the-art material characterization technologies, as well as MEMS-based test structures. It is found that the SiC films possess many desirable properties for MEMS applications, such as high Young's modulus, high fracture strength, and low stiction characteristics. The developed SiC technology is applied to build SiC-based MEMS resonators with resonant

  1. Control of microwave signals using bichromatic electromechanically induced transparency in multimode circuit electromechanical systems

    NASA Astrophysics Data System (ADS)

    Cheng, Jiang; Yuanshun, Cui; Xintian, Bian; Xiaowei, Li; Guibin, Chen

    2016-05-01

    We theoretically investigate the tunable delay and advancement of microwave signals based on bichromatic electromechanically induced transparency in a three-mode circuit electromechanical system, where two nanomechanical resonators with closely spaced frequencies are independently coupled to a common microwave cavity. In the presence of a strong microwave pump field, we obtain two transparency windows accompanied by steep phase dispersion in the transmitted microwave probe field. The width of the transparency window and the group delay of the probe field can be controlled effectively by the power of the pump field. It is shown that the maximum group delay of 0.12 ms and the advancement of 0.27 ms can be obtained in the current experiments. Project supported by the National Natural Science Foundation of China (Grant Nos. 11304110 and 11174101), the Jiangsu Natural Science Foundation, China (Grant Nos. BK20130413 and BK2011411), and the Natural Science Foundation of Jiangsu Higher Education Institutions of China (Grant Nos. 13KJB140002 and 15KJB460004).

  2. A Bio-Inspired Electromechanical System: Artificial Hair Cell

    NASA Astrophysics Data System (ADS)

    Ahn, Kang-Hun

    Inspired by recent biophysical study on the auditory sensory organs, we study electromechanical system which functions similar to the hair cell of the ear. One of the important mechanisms of hair cells, adaptation, is mimicked by an electromechanical feedback loop. The proposed artificial hair cell functions similar to a living sensory organ in the sense that it senses input force signal in spite of the relatively strong noise. Numerical simulation of the proposed system shows otoacoustic sound emission, which was observed in the experiments on the hair cells of the bullfrog. This spontaneous motion is noise-induced periodic motion which is controlled by the time scale of adaptation process and the mechanical damping.

  3. A Hybrid Actuation System Demonstrating Significantly Enhanced Electromechanical Performance

    NASA Technical Reports Server (NTRS)

    Su, Ji; Xu, Tian-Bing; Zhang, Shujun; Shrout, Thomas R.; Zhang, Qiming

    2004-01-01

    A hybrid actuation system (HYBAS) utilizing advantages of a combination of electromechanical responses of an electroactive polymer (EAP), an electrostrictive copolymer, and an electroactive ceramic single crystal, PZN-PT single crystal, has been developed. The system employs the contribution of the actuation elements cooperatively and exhibits a significantly enhanced electromechanical performance compared to the performances of the device made of each constituting material, the electroactive polymer or the ceramic single crystal, individually. The theoretical modeling of the performances of the HYBAS is in good agreement with experimental observation. The consistence between the theoretical modeling and experimental test make the design concept an effective route for the development of high performance actuating devices for many applications. The theoretical modeling, fabrication of the HYBAS and the initial experimental results will be presented and discussed.

  4. Design and Simulation of MEMS Enabled Systems

    NASA Astrophysics Data System (ADS)

    da Silva, Mark

    2001-03-01

    Over the past two decades considerable progress in microsystems (MEMS) fabrication technologies has been made resulting in a variety of commercially successful devices. Most of these devices have required application specific fabrication steps, which must be developed, and the lack of proper design tools often resulted in repeated prototyping that was expensive and time consuming. Further development of MEMS enabled commercial products and reduction of the time to market requires implementation of a concurrent design methodology through better design tools and standardization of the fabrication processes. The cross-disciplinary nature of MEMS-Enabled Systems necessitates designers with different backgrounds to work together in understanding the effects of one sub-system on another and this requires a top-down approach to integrated system design. Design tools that can facilitate this communication and reduce the need for excessive prototype fabrication and test iterations and significantly reduce cost and time-to-market are vitally important. The main focus of this article is to describe the top-down design methodology and and ongoing research on tools that facilitate concurrent design of MEMS enabled systems.

  5. Microelectromechanical Systems (MEMS) Actuators for Antenna Reconfigurability

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.; Chun, Donghoon; Katehi, Linda P. B.

    2001-01-01

    A novel microelectromechanical systems (MEMS) actuator for patch antenna reconfiguration, is presented for the first time. A key feature is the capability of multi-band operation without greatly increasing the antenna element dimensions. Experimental results demonstrate that the center frequency can be reconfigured from few hundred MHz to few GHz away from the nominal operating frequency.

  6. Introduction to applications and industries for Microelectromechanical Systems (MEMS).

    SciTech Connect

    Walraven, Jeremy Allen

    2003-07-01

    Microelectromechanical Systems (MEMS) have gained acceptance as viable products for many commercial and government applications. MEMS are currently being used as displays for digital projection systems, sensors for airbag deployment systems, inkjet print head systems, and optical routers. This paper will discuss current and future MEMS applications. What are MEMS? MEMS are typically defined as microscopic devices designed, processed, and used to interact or produce changes within a local environment. A mechanical, electrical, or chemical stimulus can be used to create a mechanical, electrical, or chemical response in a local environment. These smaller, more sophisticated devices that think, act, sense, and communicate are replacing their bulk counterparts in many traditional applications.

  7. MEMS accelerometers in accurate mount positioning systems

    NASA Astrophysics Data System (ADS)

    Mészáros, László; Pál, András.; Jaskó, Attila

    2014-07-01

    In order to attain precise, accurate and stateless positioning of telescope mounts we apply microelectromechanical accelerometer systems (also known as MEMS accelerometers). In common practice, feedback from the mount position is provided by electronic, optical or magneto-mechanical systems or via real-time astrometric solution based on the acquired images. Hence, MEMS-based systems are completely independent from these mechanisms. Our goal is to investigate the advantages and challenges of applying such devices and to reach the sub-arcminute range { that is well smaller than the field-of-view of conventional imaging telescope systems. We present how this sub-arcminute accuracy can be achieved with very cheap MEMS sensors. Basically, these sensors yield raw output within an accuracy of a few degrees. We show what kind of calibration procedures could exploit spherical and cylindrical constraints between accelerometer output channels in order to achieve the previously mentioned accuracy level. We also demonstrate how can our implementation be inserted in a telescope control system. Although this attainable precision is less than both the resolution of telescope mount drive mechanics and the accuracy of astrometric solutions, the independent nature of attitude determination could significantly increase the reliability of autonomous or remotely operated astronomical observations.

  8. Quartz-superconductor quantum electromechanical system

    NASA Astrophysics Data System (ADS)

    Woolley, Matt; Emzir, Muhammad; Milburn, Gerard; Jerger, Markus; Goryachev, Maxim; Tobar, Mike; Fedorov, Arkady

    Quartz bulk acoustic wave oscillators support mechanical modes with very high resonance frequencies and extremely high quality factors. As such, they provide an appealing platform for quantum optics experiments with phonons, gravitational wave detection, and tests of quantum mechanics. We propose to cool and measure the motion of a quartz oscillator using a transmon, with the coupling mediated by a tuneable superconducting LC circuit. The mechanical motion (~250MHz) is resonantly coupled to the LC circuit (~250MHz) by a piezoelectric interaction, the LC circuit is coupled to the transmon (~8GHz) via sideband transitions, and there is a smaller direct coupling between the quartz oscillator and the transmon. By driving the transmon on its red sideband, the mechanical and electrical oscillators may be cooled close to their quantum ground state. By observing the fluorescence of the qubit, the occupations of the oscillators may be determined via the motional sidebands they induce. A minimal model of this system consists of a qubit coupled to two oscillators, which are themselves mutually coupled. The steady-state of the system and the qubit fluorescence spectrum are evaluated analytically using a perturbative projection operator technique, and verified numerically.

  9. MEMS sensors and wireless telemetry for distributed systems

    SciTech Connect

    Britton, C.L. Jr.; Warmack, R.J.; Smith, S.F.

    1998-02-01

    Selectively coated cantilevers are being developed at ORNL for chemical and biological sensing. The sensitivity can exceed that of other electro-mechanical devices as parts-per-trillion detection can be demonstrated for certain species. The authors are now proceeding to develop systems that employ electrically readable microcantilevers in a standard MEMS process and standard CMOS processes. One of their primary areas of interest is chemical sensing for environmental applications. Towards this end, they are presently developing electronic readout of a mercury-sensitive coated cantilever. In order to field arrays of distributed sensors, a wireless network for data reporting is needed. For this, the authors are developing on-chip spread-spectrum encoding and modulation circuitry to improve the robustness and security of sensor data in typical interference- and multipath-impaired environments. They have also provided for a selection of distinct spreading codes to serve groups of sensors in a common environment by the application of code-division multiple-access techniques. Most of the RF circuitry they have designed and fabricated in 0.5 {micro}m CMOS has been tested and verified operational to above 1 GHz. The initial intended operation is for use in the 915 MHz Industrial, Scientific, and Medical (ISM) band. This paper presents measured data on the microcantilever-based mercury detector. They also present design data and measurements of the RF telemetry chip.

  10. Troubleshooting of an Electromechanical System (Westinghouse PLC Controlling a Pneumatic Robot). High-Technology Training Module.

    ERIC Educational Resources Information Center

    Tucker, James D.

    This training module on the troubleshooting of an electromechanical system, The Westinghouse Programmable Logic Controller (PLC) controlling a pneumatic robot, is used for a troubleshooting unit in an electromechanical systems/robotics and automation systems course. In this unit, students locate and repair a defect in a PLC-operated machine. The…

  11. 78 FR 22293 - Certain Microelectromechanical Systems (“MEMS Devices”) and Products Containing Same; Institution...

    Federal Register 2010, 2011, 2012, 2013, 2014

    2013-04-15

    ... COMMISSION Certain Microelectromechanical Systems (``MEMS Devices'') and Products Containing Same... United States after importation of certain microelectromechanical systems (``MEMS Devices'') and products... after importation of certain microelectromechanical systems (``MEMS Devices'') and products...

  12. 78 FR 16531 - Certain Microelectromechanical Systems (“MEMS Devices”) and Products Containing Same; Notice of...

    Federal Register 2010, 2011, 2012, 2013, 2014

    2013-03-15

    ... COMMISSION Certain Microelectromechanical Systems (``MEMS Devices'') and Products Containing Same; Notice of... Commission has received a complaint entitled Certain Microelectromechanical Systems (``MEMS Devices'') and... microelectromechanical systems (``MEMS devices'') and products containing same. The complaint names as respondents...

  13. Electro-Mechanical Systems for Extreme Space Environments

    NASA Technical Reports Server (NTRS)

    Mojarradi, Mohammad M.; Tyler, Tony R.; Abel, Phillip B.; Levanas, Greg

    2011-01-01

    Exploration beyond low earth orbit presents challenges for hardware that must operate in extreme environments. The current state of the art is to isolate and provide heating for sensitive hardware in order to survive. However, this protection results in penalties of weight and power for the spacecraft. This is particularly true for electro-mechanical based technology such as electronics, actuators and sensors. Especially when considering distributed electronics, many electro-mechanical systems need to be located in appendage type locations, making it much harder to protect from the extreme environments. The purpose of this paper to describe the advances made in the area of developing electro-mechanical technology to survive these environments with minimal protection. The Jet Propulsion Lab (JPL), the Glenn Research Center (GRC), the Langley Research Center (LaRC), and Aeroflex, Inc. over the last few years have worked to develop and test electro-mechanical hardware that will meet the stringent environmental demands of the moon, and which can also be leveraged for other challenging space exploration missions. Prototype actuators and electronics have been built and tested. Brushless DC actuators designed by Aeroflex, Inc have been tested with interface temperatures as low as 14 degrees Kelvin. Testing of the Aeroflex design has shown that a brushless DC motor with a single stage planetary gearbox can operate in low temperature environments for at least 120 million cycles (measured at motor) if long life is considered as part of the design. A motor control distributed electronics concept developed by JPL was built and operated at temperatures as low as -160 C, with many components still operational down to -245 C. Testing identified the components not capable of meeting the low temperature goal of -230 C. This distributed controller is universal in design with the ability to control different types of motors and read many different types of sensors. The controller

  14. Evaluation of the electromechanical properties of the cardiovascular system

    NASA Technical Reports Server (NTRS)

    Bergman, S. A., Jr.; Hoffler, G. W.; Johnson, R. L.

    1974-01-01

    Cardiovascular electromechanical measurements were collected on returning Skylab crewmembers at rest and during both lower body negative pressure and exercise stress testing. These data were compared with averaged responses from multiple preflight tests. Systolic time intervals and first heart sound amplitude changes were measured. Clinical cardiovascular examinations and clinical phonocardiograms were evaluated. All changes noted returned to normal within 30 days postflight so that the processes appear to be transient and self limited. The cardiovascular system seems to adapt quite readily to zero-g, and more importantly it is capable of readaptation to one-g after long duration space flight. Repeated exposures to zero-g also appear to have no detrimental effects on the cardiovascular system.

  15. A 2-DOF MEMS positioning system

    NASA Astrophysics Data System (ADS)

    Sivakumar, Ganapathy; Mathews, James; Dallas, Tim E.

    2010-02-01

    We report on the design, fabrication, and testing of a 2 degree of freedom MEMS positioning system. Sandia National Laboratories' MEMS foundry process was utilized for the fabrication of the device; this process incorporates five layers of polysilicon and four sacrificial layers of silicon dioxide. The actuation was achieved by identical comb-drives on both axes. The comb drives produce a displacement of ~ 4 μm which was amplified to ~ 30 μm by the use of a distance multiplier. A pin and track arrangement in the X and Y arms, extending from the actuator assembly, allows bi-axis motion. The stage is connected to the central pin. For testing the performance of the fabricated design a custom made optical characterization setup was assembled. To provide the actuation signals to the stage, a Keithley 2400 source meter was programmed using LabView to provide actuation voltages from 0-100 V with a 2 volt step. An optical microscope, interfaced with a Canon S5 IS digital camera, was used to record the actuation events for the measurement of in-plane displacement. Displacement at the various actuation voltages was obtained using a National Instruments' Vision image analysis software routine. The device has been tested and demonstrates a useful design for realizing a bi-directional 2-D positioning system. The positioning system is capable of 0 - 30 μm of motion in both the X and Y axes, with displacement showing a quadratic relationship with the applied voltage.

  16. A dynamic system matching technique for improving the accuracy of MEMS gyroscopes

    SciTech Connect

    Stubberud, Peter A.; Stubberud, Stephen C.; Stubberud, Allen R.

    2014-12-10

    A classical MEMS gyro transforms angular rates into electrical values through Euler's equations of angular rotation. Production models of a MEMS gyroscope will have manufacturing errors in the coefficients of the differential equations. The output signal of a production gyroscope will be corrupted by noise, with a major component of the noise due to the manufacturing errors. As is the case of the components in an analog electronic circuit, one way of controlling the variability of a subsystem is to impose extremely tight control on the manufacturing process so that the coefficient values are within some specified bounds. This can be expensive and may even be impossible as is the case in certain applications of micro-electromechanical (MEMS) sensors. In a recent paper [2], the authors introduced a method for combining the measurements from several nominally equal MEMS gyroscopes using a technique based on a concept from electronic circuit design called dynamic element matching [1]. Because the method in this paper deals with systems rather than elements, it is called a dynamic system matching technique (DSMT). The DSMT generates a single output by randomly switching the outputs of several, nominally identical, MEMS gyros in and out of the switch output. This has the effect of 'spreading the spectrum' of the noise caused by the coefficient errors generated in the manufacture of the individual gyros. A filter can then be used to eliminate that part of the spread spectrum that is outside the pass band of the gyro. A heuristic analysis in that paper argues that the DSMT can be used to control the effects of the random coefficient variations. In a follow-on paper [4], a simulation of a DSMT indicated that the heuristics were consistent. In this paper, analytic expressions of the DSMT noise are developed which confirm that the earlier conclusions are valid. These expressions include the various DSMT design parameters and, therefore, can be used as design tools for DSMT

  17. A dynamic system matching technique for improving the accuracy of MEMS gyroscopes

    NASA Astrophysics Data System (ADS)

    Stubberud, Peter A.; Stubberud, Stephen C.; Stubberud, Allen R.

    2014-12-01

    A classical MEMS gyro transforms angular rates into electrical values through Euler's equations of angular rotation. Production models of a MEMS gyroscope will have manufacturing errors in the coefficients of the differential equations. The output signal of a production gyroscope will be corrupted by noise, with a major component of the noise due to the manufacturing errors. As is the case of the components in an analog electronic circuit, one way of controlling the variability of a subsystem is to impose extremely tight control on the manufacturing process so that the coefficient values are within some specified bounds. This can be expensive and may even be impossible as is the case in certain applications of micro-electromechanical (MEMS) sensors. In a recent paper [2], the authors introduced a method for combining the measurements from several nominally equal MEMS gyroscopes using a technique based on a concept from electronic circuit design called dynamic element matching [1]. Because the method in this paper deals with systems rather than elements, it is called a dynamic system matching technique (DSMT). The DSMT generates a single output by randomly switching the outputs of several, nominally identical, MEMS gyros in and out of the switch output. This has the effect of 'spreading the spectrum' of the noise caused by the coefficient errors generated in the manufacture of the individual gyros. A filter can then be used to eliminate that part of the spread spectrum that is outside the pass band of the gyro. A heuristic analysis in that paper argues that the DSMT can be used to control the effects of the random coefficient variations. In a follow-on paper [4], a simulation of a DSMT indicated that the heuristics were consistent. In this paper, analytic expressions of the DSMT noise are developed which confirm that the earlier conclusions are valid. These expressions include the various DSMT design parameters and, therefore, can be used as design tools for DSMT

  18. Mass sensing based on a circuit cavity electromechanical system

    NASA Astrophysics Data System (ADS)

    Jiang, Cheng; Chen, Bin; Li, Jin-Jin; Zhu, Ka-Di

    2011-10-01

    We present a scheme for mass sensing based on a circuit cavity electromechanical system where a free-standing, flexible aluminium membrane is capacitively coupled to a superconducting microwave cavity. Integration with the microwave cavity enables capacitive readout of the mechanical resonance directly on the chip. A microwave pump field and a second probe field are simultaneously applied to the cavity. The accreted mass landing on the membrane can be measured conveniently by tracking the mechanical resonance frequency shifts due to mass changes in the probe transmission spectrum. The mass responsivity for the membrane is 0.72 Hz/ag and we demonstrate that frequency shifts induced by adsorption of one hundred 1587 bp DNA molecules can be well resolved in the probe transmission spectrum.

  19. Artificial fish skin of self-powered micro-electromechanical systems hair cells for sensing hydrodynamic flow phenomena.

    PubMed

    Asadnia, Mohsen; Kottapalli, Ajay Giri Prakash; Miao, Jianmin; Warkiani, Majid Ebrahimi; Triantafyllou, Michael S

    2015-10-01

    Using biological sensors, aquatic animals like fishes are capable of performing impressive behaviours such as super-manoeuvrability, hydrodynamic flow 'vision' and object localization with a success unmatched by human-engineered technologies. Inspired by the multiple functionalities of the ubiquitous lateral-line sensors of fishes, we developed flexible and surface-mountable arrays of micro-electromechanical systems (MEMS) artificial hair cell flow sensors. This paper reports the development of the MEMS artificial versions of superficial and canal neuromasts and experimental characterization of their unique flow-sensing roles. Our MEMS flow sensors feature a stereolithographically fabricated polymer hair cell mounted on Pb(Zr(0.52)Ti(0.48))O3 micro-diaphragm with floating bottom electrode. Canal-inspired versions are developed by mounting a polymer canal with pores that guide external flows to the hair cells embedded in the canal. Experimental results conducted employing our MEMS artificial superficial neuromasts (SNs) demonstrated a high sensitivity and very low threshold detection limit of 22 mV/(mm s(-1)) and 8.2 µm s(-1), respectively, for an oscillating dipole stimulus vibrating at 35 Hz. Flexible arrays of such superficial sensors were demonstrated to localize an underwater dipole stimulus. Comparative experimental studies revealed a high-pass filtering nature of the canal encapsulated sensors with a cut-off frequency of 10 Hz and a flat frequency response of artificial SNs. Flexible arrays of self-powered, miniaturized, light-weight, low-cost and robust artificial lateral-line systems could enhance the capabilities of underwater vehicles. PMID:26423435

  20. Artificial fish skin of self-powered micro-electromechanical systems hair cells for sensing hydrodynamic flow phenomena.

    PubMed

    Asadnia, Mohsen; Kottapalli, Ajay Giri Prakash; Miao, Jianmin; Warkiani, Majid Ebrahimi; Triantafyllou, Michael S

    2015-10-01

    Using biological sensors, aquatic animals like fishes are capable of performing impressive behaviours such as super-manoeuvrability, hydrodynamic flow 'vision' and object localization with a success unmatched by human-engineered technologies. Inspired by the multiple functionalities of the ubiquitous lateral-line sensors of fishes, we developed flexible and surface-mountable arrays of micro-electromechanical systems (MEMS) artificial hair cell flow sensors. This paper reports the development of the MEMS artificial versions of superficial and canal neuromasts and experimental characterization of their unique flow-sensing roles. Our MEMS flow sensors feature a stereolithographically fabricated polymer hair cell mounted on Pb(Zr(0.52)Ti(0.48))O3 micro-diaphragm with floating bottom electrode. Canal-inspired versions are developed by mounting a polymer canal with pores that guide external flows to the hair cells embedded in the canal. Experimental results conducted employing our MEMS artificial superficial neuromasts (SNs) demonstrated a high sensitivity and very low threshold detection limit of 22 mV/(mm s(-1)) and 8.2 µm s(-1), respectively, for an oscillating dipole stimulus vibrating at 35 Hz. Flexible arrays of such superficial sensors were demonstrated to localize an underwater dipole stimulus. Comparative experimental studies revealed a high-pass filtering nature of the canal encapsulated sensors with a cut-off frequency of 10 Hz and a flat frequency response of artificial SNs. Flexible arrays of self-powered, miniaturized, light-weight, low-cost and robust artificial lateral-line systems could enhance the capabilities of underwater vehicles.

  1. Artificial fish skin of self-powered micro-electromechanical systems hair cells for sensing hydrodynamic flow phenomena

    PubMed Central

    Asadnia, Mohsen; Kottapalli, Ajay Giri Prakash; Miao, Jianmin; Warkiani, Majid Ebrahimi; Triantafyllou, Michael S.

    2015-01-01

    Using biological sensors, aquatic animals like fishes are capable of performing impressive behaviours such as super-manoeuvrability, hydrodynamic flow ‘vision’ and object localization with a success unmatched by human-engineered technologies. Inspired by the multiple functionalities of the ubiquitous lateral-line sensors of fishes, we developed flexible and surface-mountable arrays of micro-electromechanical systems (MEMS) artificial hair cell flow sensors. This paper reports the development of the MEMS artificial versions of superficial and canal neuromasts and experimental characterization of their unique flow-sensing roles. Our MEMS flow sensors feature a stereolithographically fabricated polymer hair cell mounted on Pb(Zr0.52Ti0.48)O3 micro-diaphragm with floating bottom electrode. Canal-inspired versions are developed by mounting a polymer canal with pores that guide external flows to the hair cells embedded in the canal. Experimental results conducted employing our MEMS artificial superficial neuromasts (SNs) demonstrated a high sensitivity and very low threshold detection limit of 22 mV/(mm s−1) and 8.2 µm s−1, respectively, for an oscillating dipole stimulus vibrating at 35 Hz. Flexible arrays of such superficial sensors were demonstrated to localize an underwater dipole stimulus. Comparative experimental studies revealed a high-pass filtering nature of the canal encapsulated sensors with a cut-off frequency of 10 Hz and a flat frequency response of artificial SNs. Flexible arrays of self-powered, miniaturized, light-weight, low-cost and robust artificial lateral-line systems could enhance the capabilities of underwater vehicles. PMID:26423435

  2. Micro electro-mechanical system piezoelectric cantilever array for a broadband vibration energy harvester.

    PubMed

    Chun, Inwoo; Lee, Hyun-Woo; Kwon, Kwang-Ho

    2014-12-01

    Limited energy sources of ubiquitous sensor networks (USNs) such as fuel cells and batteries have grave drawbacks such as the need for replacements and re-charging owing to their short durability and environmental pollution. Energy harvesting which is converting environmental mechanical vibration into electrical energy has been researched with some piezoelectric materials and various cantilever designs to increase the efficiency of energy-harvesting devices. In this study, we focused on an energy-harvesting cantilever with a broadband vibration frequency. We fabricated a lead zirconate titanate (PZT) cantilever array with various Si proof masses on small beams (5.5 mm x 0.5 mm x 0.5 mm). We obtained broadband resonant frequencies ranging between 127 Hz and 136 Hz using a micro electro-mechanical system (MEMS) process. In order to obtain broadband resonant characteristics, the cantilever array was comprised of six cantilevers with different resonant frequencies. We obtained an output power of about 2.461 μW at an acceleration of 0.23 g and a resistance of 4 kΩ. The measured bandwidth of the resonant frequency was approximately 9 Hz (127-136 Hz), which is about six times wider than the bandwidth of a single cantilever. PMID:25971046

  3. Micro electro-mechanical system piezoelectric cantilever array for a broadband vibration energy harvester.

    PubMed

    Chun, Inwoo; Lee, Hyun-Woo; Kwon, Kwang-Ho

    2014-12-01

    Limited energy sources of ubiquitous sensor networks (USNs) such as fuel cells and batteries have grave drawbacks such as the need for replacements and re-charging owing to their short durability and environmental pollution. Energy harvesting which is converting environmental mechanical vibration into electrical energy has been researched with some piezoelectric materials and various cantilever designs to increase the efficiency of energy-harvesting devices. In this study, we focused on an energy-harvesting cantilever with a broadband vibration frequency. We fabricated a lead zirconate titanate (PZT) cantilever array with various Si proof masses on small beams (5.5 mm x 0.5 mm x 0.5 mm). We obtained broadband resonant frequencies ranging between 127 Hz and 136 Hz using a micro electro-mechanical system (MEMS) process. In order to obtain broadband resonant characteristics, the cantilever array was comprised of six cantilevers with different resonant frequencies. We obtained an output power of about 2.461 μW at an acceleration of 0.23 g and a resistance of 4 kΩ. The measured bandwidth of the resonant frequency was approximately 9 Hz (127-136 Hz), which is about six times wider than the bandwidth of a single cantilever.

  4. Multimode damage tracking and failure prognosis in electromechanical systems

    NASA Astrophysics Data System (ADS)

    Chelidze, David

    2002-07-01

    In this paper a modification to a general-purpose machinery diagnostic/prognostic algorithm that can handle two or more simultaneously occurring failure processes is described. The method is based on a theory that views damage as occurring in a hierarchical dynamical system where slowly evolving, hidden failure processes are causing nonstationarity in a fast, directly observable system. The damage variable tracking is based on statistics calculated using data-based local linear models constructed in the reconstructed phase space of the fast system. These statistics are designed to measure a local change in the fast systems flow caused by the slow-time failure processes. The method is applied to a mathematical model of an experimental electromechanical system consisting of a beam vibrating in a potential field crated by two electromagnets. Two failure modes are introduced through discharging batteries supplying power to these electromagnets. Open circuit terminal voltage of these batteries is a two-dimensional damage variable. Using computer simulations, it is demonstrated both analytically and experimentally that the proposed method can accurately track both damage variables using only a displacement measurements from the vibrating beam. The accurate estimates of remaining time to failure for each battery are given well ahead of actual breakdowns.

  5. A MEMS-based, wireless, biometric-like security system

    NASA Astrophysics Data System (ADS)

    Cross, Joshua D.; Schneiter, John L.; Leiby, Grant A.; McCarter, Steven; Smith, Jeremiah; Budka, Thomas P.

    2010-04-01

    We present a system for secure identification applications that is based upon biometric-like MEMS chips. The MEMS chips have unique frequency signatures resulting from fabrication process variations. The MEMS chips possess something analogous to a "voiceprint". The chips are vacuum encapsulated, rugged, and suitable for low-cost, highvolume mass production. Furthermore, the fabrication process is fully integrated with standard CMOS fabrication methods. One is able to operate the MEMS-based identification system similarly to a conventional RFID system: the reader (essentially a custom network analyzer) detects the power reflected across a frequency spectrum from a MEMS chip in its vicinity. We demonstrate prototype "tags" - MEMS chips placed on a credit card-like substrate - to show how the system could be used in standard identification or authentication applications. We have integrated power scavenging to provide DC bias for the MEMS chips through the use of a 915 MHz source in the reader and a RF-DC conversion circuit on the tag. The system enables a high level of protection against typical RFID hacking attacks. There is no need for signal encryption, so back-end infrastructure is minimal. We believe this system would make a viable low-cost, high-security system for a variety of identification and authentication applications.

  6. Experimental Identification of Smartphones Using Fingerprints of Built-In Micro-Electro Mechanical Systems (MEMS)

    PubMed Central

    Baldini, Gianmarco; Steri, Gary; Dimc, Franc; Giuliani, Raimondo; Kamnik, Roman

    2016-01-01

    The correct identification of smartphones has various applications in the field of security or the fight against counterfeiting. As the level of sophistication in counterfeit electronics increases, detection procedures must become more accurate but also not destructive for the smartphone under testing. Some components of the smartphone are more likely to reveal their authenticity even without a physical inspection, since they are characterized by hardware fingerprints detectable by simply examining the data they provide. This is the case of MEMS (Micro Electro-Mechanical Systems) components like accelerometers and gyroscopes, where tiny differences and imprecisions in the manufacturing process determine unique patterns in the data output. In this paper, we present the experimental evaluation of the identification of smartphones through their built-in MEMS components. In our study, three different phones of the same model are subject to repeatable movements (composing a repeatable scenario) using an high precision robotic arm. The measurements from MEMS for each repeatable scenario are collected and analyzed. The identification algorithm is based on the extraction of the statistical features of the collected data for each scenario. The features are used in a support vector machine (SVM) classifier to identify the smartphone. The results of the evaluation are presented for different combinations of features and Inertial Measurement Unit (IMU) outputs, which show that detection accuracy of higher than 90% is achievable. PMID:27271630

  7. Experimental Identification of Smartphones Using Fingerprints of Built-In Micro-Electro Mechanical Systems (MEMS).

    PubMed

    Baldini, Gianmarco; Steri, Gary; Dimc, Franc; Giuliani, Raimondo; Kamnik, Roman

    2016-01-01

    The correct identification of smartphones has various applications in the field of security or the fight against counterfeiting. As the level of sophistication in counterfeit electronics increases, detection procedures must become more accurate but also not destructive for the smartphone under testing. Some components of the smartphone are more likely to reveal their authenticity even without a physical inspection, since they are characterized by hardware fingerprints detectable by simply examining the data they provide. This is the case of MEMS (Micro Electro-Mechanical Systems) components like accelerometers and gyroscopes, where tiny differences and imprecisions in the manufacturing process determine unique patterns in the data output. In this paper, we present the experimental evaluation of the identification of smartphones through their built-in MEMS components. In our study, three different phones of the same model are subject to repeatable movements (composing a repeatable scenario) using an high precision robotic arm. The measurements from MEMS for each repeatable scenario are collected and analyzed. The identification algorithm is based on the extraction of the statistical features of the collected data for each scenario. The features are used in a support vector machine (SVM) classifier to identify the smartphone. The results of the evaluation are presented for different combinations of features and Inertial Measurement Unit (IMU) outputs, which show that detection accuracy of higher than 90% is achievable. PMID:27271630

  8. Experimental Identification of Smartphones Using Fingerprints of Built-In Micro-Electro Mechanical Systems (MEMS).

    PubMed

    Baldini, Gianmarco; Steri, Gary; Dimc, Franc; Giuliani, Raimondo; Kamnik, Roman

    2016-06-03

    The correct identification of smartphones has various applications in the field of security or the fight against counterfeiting. As the level of sophistication in counterfeit electronics increases, detection procedures must become more accurate but also not destructive for the smartphone under testing. Some components of the smartphone are more likely to reveal their authenticity even without a physical inspection, since they are characterized by hardware fingerprints detectable by simply examining the data they provide. This is the case of MEMS (Micro Electro-Mechanical Systems) components like accelerometers and gyroscopes, where tiny differences and imprecisions in the manufacturing process determine unique patterns in the data output. In this paper, we present the experimental evaluation of the identification of smartphones through their built-in MEMS components. In our study, three different phones of the same model are subject to repeatable movements (composing a repeatable scenario) using an high precision robotic arm. The measurements from MEMS for each repeatable scenario are collected and analyzed. The identification algorithm is based on the extraction of the statistical features of the collected data for each scenario. The features are used in a support vector machine (SVM) classifier to identify the smartphone. The results of the evaluation are presented for different combinations of features and Inertial Measurement Unit (IMU) outputs, which show that detection accuracy of higher than 90% is achievable.

  9. MEMS scanning micromirror for optical coherence tomography.

    PubMed

    Strathman, Matthew; Liu, Yunbo; Keeler, Ethan G; Song, Mingli; Baran, Utku; Xi, Jiefeng; Sun, Ming-Ting; Wang, Ruikang; Li, Xingde; Lin, Lih Y

    2015-01-01

    This paper describes an endoscopic-inspired imaging system employing a micro-electromechanical system (MEMS) micromirror scanner to achieve beam scanning for optical coherence tomography (OCT) imaging. Miniaturization of a scanning mirror using MEMS technology can allow a fully functional imaging probe to be contained in a package sufficiently small for utilization in a working channel of a standard gastroesophageal endoscope. This work employs advanced image processing techniques to enhance the images acquired using the MEMS scanner to correct non-idealities in mirror performance. The experimental results demonstrate the effectiveness of the proposed technique.

  10. Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors

    NASA Astrophysics Data System (ADS)

    Agrawal, Richa; Beidaghi, Majid; Chen, Wei; Wang, Chunlei

    2015-05-01

    The rapid development in miniaturized electronic devices has led to an ever increasing demand for high-performance rechargeable micropower scources. Microsupercapacitors in particular have gained much attention in recent years owing to their ability to provide high pulse power while maintaining long cycle lives. Carbon microelectromechanical systems (C-MEMS) is a powerful approach to fabricate high aspect ratio carbon microelectrode arrays, which has been proved to hold great promise as a platform for energy storage. C-MEMS is a versatile technique to create carbon structures by pyrolyzing a patterned photoresist. Furthermore, different active materials can be loaded onto these microelectrode platforms for further enhancement of the electrochemical performance of the C-MEMS platform. In this article, different techniques and methods in order to enhance C-MEMS based various electrochemical capacitor systems have been discussed, including electrochemical activation of C-MEMS structures for miniaturized supercapacitor applications, integration of carbon nanostructures like carbon nanotubes onto C-MEMS structures and also integration of pseudocapacitive materials such as polypyrrole onto C-MEMS structures.

  11. Polarization Reconfigurable Patch Antenna Using Microelectromechanical Systems (MEMS) Actuators

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.; Chun, Donghoon; Katehi, Linda P. B.

    2002-01-01

    The paper demonstrates a nearly square patch antenna integrated with a novel microelectromechanical systems (MEMS) actuator for reconfiguring the polarization. Experimental results demonstrate that at a fixed frequency, the polarization can be reconfigured, from circular to linear.

  12. Review on the modeling of electrostatic MEMS.

    PubMed

    Chuang, Wan-Chun; Lee, Hsin-Li; Chang, Pei-Zen; Hu, Yuh-Chung

    2010-01-01

    Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. PMID:22219707

  13. Review on the Modeling of Electrostatic MEMS

    PubMed Central

    Chuang, Wan-Chun; Lee, Hsin-Li; Chang, Pei-Zen; Hu, Yuh-Chung

    2010-01-01

    Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. PMID:22219707

  14. Combined photonics and MEMS function demonstration

    NASA Astrophysics Data System (ADS)

    Blum-Spahn, Olga; Warren, Mial E.; Hou, Hong Q.; Carson, Richard F.; Choquette, Kent D.; Rodgers, M. Steven; Sniegowski, Jeffry J.

    1998-04-01

    We discuss tow examples of integration of micro- electromechanical system (MEMs) and a photonic device. In the first instance, a MEMs locking device pin is driven by a voltage generated by photovoltaic cells connected in series, which are driven by a laser. In the second case, a VCSEL emitting at 1.06 micrometers is packaged together with a metallized MEMs shutter. By appropriate alignment to the opening in the shutter, the VCSEL is turned on and off by the movement of the Si chopper wheel.

  15. MEMS and microfluidics for diagnostics devices.

    PubMed

    Rosen, Y; Gurman, P

    2010-06-01

    There are conditions in clinical medicine demanding critical therapeutic decisions. These conditions necessitate accuracy, rapidity, accessibility, cost-effectiveness and mobility. New technologies have been developed in order to address these challenges. Microfluidics and Micro Electro-Mechanical Systems are two of such technologies. Microfluidics, a discipline that involves processing fluids at the microscale in etched microchannels, is being used to build lab- on-a-chip systems to run chemical and biological assays. These systems are being transformed into handheld devices designed to be used at remote settings or at the bedside. MEMS are microscale electromechanical elements integrated in lab chip systems or used as individual components. MEMS based sensors represents a highly developed field with successful commercialized products currently being incorporated into vitro,ex vivo and in vivo devices. In the present paper several examples of microfluidic devices and MEMS sensors are introduced together with some current examples of commercialized products. Future challenges and trends will be discussed. PMID:20199381

  16. Digital reflection holography based systems development for MEMS testing

    NASA Astrophysics Data System (ADS)

    Singh, Vijay Raj; Liansheng, Sui; Asundi, Anand

    2010-05-01

    MEMS are tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers and nanometers. Testing of MEMS device is an important part in carrying out their functional assessment and reliability analysis. Development of systems based on digital holography (DH) for MEMS inspection and characterization is presented in this paper. Two DH reflection systems, table-top and handheld types, are developed depending on the MEMS measurement requirements and their capabilities are presented. The methodologies for the systems are developed for 3D profile inspection and static & dynamic measurements, which is further integrated with in-house developed software that provides the measurement results in near real time. The applications of the developed systems are demonstrated for different MEMS devices for 3D profile inspection, static deformation/deflection measurements and vibration analysis. The developed systems are well suitable for the testing of MEMS and Microsystems samples, with full-field, static & dynamic inspection as well as to monitor micro-fabrication process.

  17. An electromechanical actuation system for an expendable launch vehicle

    NASA Technical Reports Server (NTRS)

    Burrows, Linda M.; Roth, Mary Ellen

    1992-01-01

    A major effort at the NASA Lewis Research Center in recent years has been to develop electro-mechanical actuators (EMA's) to replace the hydraulic systems used for thrust vector control (TVC) on launch vehicles. This is an attempt ot overcome the inherent inefficiencies and costs associated with the existing hydraulic structures. General Dynamics Space Systems Division, under contract to NASA Lewis, is developing 18.6 kW (25 hp), 29.8 kW (40 hp), and 52.2 kW (70 hp) peak EMA systems to meet the power demands for TVC on a family of vehicles developed for the National Launch System. These systems utilize a pulse population modulated converter and field-oriented control scheme to obtain independent control of both the voltage and frequency. These techniques allow an induction motor to be operated at its maximum torque at all times. At NASA Lewis, we are building on this technology to develop our own in-house system capable of meeting the peak power requirements for an expendable launch vehicle (ELV) such as the Atlas. Our EMA will be capable of delivering 22.4 kW (30 hp) peak power with a nominal of 6.0 kW (8 hp). This system differs from the previous ones in two areas: (1) the use of advanced control methods, and (2) the incorporation of built-in-test. The advanced controls are essential for minimizing the controller size, while the built-in-test is necessary to enhance the system reliability and vehicle health monitoring. The ultimate goal of this program is to demonstrate an EMA which will be capable of self-test and easy integration into other projects. This paper will describe the effort underway at NASA Lewis to develop an EMA for an Atlas class ELV. An explanation will be given for each major technology block, and the status of each major technology block and the status of the overall program will be reported.

  18. Failure analysis issues in microelectromechanical systems (MEMS).

    SciTech Connect

    Walraven, Jeremy Allen

    2005-07-01

    Failure analysis and device characterization of MEMS components are critical steps in understanding the root causes of failure and improving device performance. At the wafer and die level these tasks can be performed with little or no sample preparation. Larger challenges occur after fabrication when the device is packaged, capped, sealed, or otherwise obstructed from view. The challenges and issues of MEMS failure analysis lie in identifying the root cause of failure for these packaged, capped, and sealed devices without perturbing the device or its immediate environment. Novel methods of gaining access to the device or preparing the device for analysis are crucial to accurately determining the root cause of failure. This paper will discuss issues identified in performing root cause failure analysis of packaged MEMS devices, as well as the methods employed to analyze them.

  19. A comparison between different error modeling of MEMS applied to GPS/INS integrated systems.

    PubMed

    Quinchia, Alex G; Falco, Gianluca; Falletti, Emanuela; Dovis, Fabio; Ferrer, Carles

    2013-07-24

    Advances in the development of micro-electromechanical systems (MEMS) have made possible the fabrication of cheap and small dimension accelerometers and gyroscopes, which are being used in many applications where the global positioning system (GPS) and the inertial navigation system (INS) integration is carried out, i.e., identifying track defects, terrestrial and pedestrian navigation, unmanned aerial vehicles (UAVs), stabilization of many platforms, etc. Although these MEMS sensors are low-cost, they present different errors, which degrade the accuracy of the navigation systems in a short period of time. Therefore, a suitable modeling of these errors is necessary in order to minimize them and, consequently, improve the system performance. In this work, the most used techniques currently to analyze the stochastic errors that affect these sensors are shown and compared: we examine in detail the autocorrelation, the Allan variance (AV) and the power spectral density (PSD) techniques. Subsequently, an analysis and modeling of the inertial sensors, which combines autoregressive (AR) filters and wavelet de-noising, is also achieved. Since a low-cost INS (MEMS grade) presents error sources with short-term (high-frequency) and long-term (low-frequency) components, we introduce a method that compensates for these error terms by doing a complete analysis of Allan variance, wavelet de-nosing and the selection of the level of decomposition for a suitable combination between these techniques. Eventually, in order to assess the stochastic models obtained with these techniques, the Extended Kalman Filter (EKF) of a loosely-coupled GPS/INS integration strategy is augmented with different states. Results show a comparison between the proposed method and the traditional sensor error models under GPS signal blockages using real data collected in urban roadways.

  20. A Comparison between Different Error Modeling of MEMS Applied to GPS/INS Integrated Systems

    PubMed Central

    Quinchia, Alex G.; Falco, Gianluca; Falletti, Emanuela; Dovis, Fabio; Ferrer, Carles

    2013-01-01

    Advances in the development of micro-electromechanical systems (MEMS) have made possible the fabrication of cheap and small dimension accelerometers and gyroscopes, which are being used in many applications where the global positioning system (GPS) and the inertial navigation system (INS) integration is carried out, i.e., identifying track defects, terrestrial and pedestrian navigation, unmanned aerial vehicles (UAVs), stabilization of many platforms, etc. Although these MEMS sensors are low-cost, they present different errors, which degrade the accuracy of the navigation systems in a short period of time. Therefore, a suitable modeling of these errors is necessary in order to minimize them and, consequently, improve the system performance. In this work, the most used techniques currently to analyze the stochastic errors that affect these sensors are shown and compared: we examine in detail the autocorrelation, the Allan variance (AV) and the power spectral density (PSD) techniques. Subsequently, an analysis and modeling of the inertial sensors, which combines autoregressive (AR) filters and wavelet de-noising, is also achieved. Since a low-cost INS (MEMS grade) presents error sources with short-term (high-frequency) and long-term (low-frequency) components, we introduce a method that compensates for these error terms by doing a complete analysis of Allan variance, wavelet de-nosing and the selection of the level of decomposition for a suitable combination between these techniques. Eventually, in order to assess the stochastic models obtained with these techniques, the Extended Kalman Filter (EKF) of a loosely-coupled GPS/INS integration strategy is augmented with different states. Results show a comparison between the proposed method and the traditional sensor error models under GPS signal blockages using real data collected in urban roadways. PMID:23887084

  1. On the eigenvalue control of electromechanical oscillations by adaptive power system stabilizer

    SciTech Connect

    Ostojic, D.; Kovacevie, B. . Elektrotehnicki Fakultet)

    1990-11-01

    This paper presents the eigenvalue control strategy which utilizes an adaptive power system stabilizer for the decentralized control of damping and frequency of electromechanical oscillations in power systems. The control procedure includes the complete identification of the decoupled subsystem model in real-time from local measurements only and the assignment of its estimated electromechanical eigenvalue by the change of stabilizer parameters. The robustness and efficiency of the proposed adaptive controller to enhance overall system stability are illustrated in several examples, including the three-machine power system model.

  2. Dynamic simulation of electromechanical systems: from Maxwell's theory to common-rail diesel injection.

    PubMed

    Kurz, S; Becker, U; Maisch, H

    2001-05-01

    This paper describes the state-of-the-art of dynamic simulation of electromechanical systems. Electromechanical systems can be split into electromagnetic and mechanical subsystems, which are described by Maxwell's equations and by Newton's law, respectively. Since such systems contain moving parts, the concepts of Lorentz and Galilean relativity are briefly addressed. The laws of physics are formulated in terms of (partial) differential equations. Numerical methods ultimately aim at linear systems of equations, which can be solved efficiently on digital computers. The various discretization methods for performing this task are discussed. Special emphasis is placed on domain decomposition as a framework for the coupling of different numerical methods such as the finite element method and the boundary element method. The paper concludes with descriptions of some applications of industrial relevance: a high performance injection valve and an electromechanical relay.

  3. MEMS reliability assessment program: progress to date

    NASA Astrophysics Data System (ADS)

    Zunino, J. L., III; Skelton, D. R.

    2007-01-01

    As the Army transforms into a more lethal, lighter and agile force, the technologies that support these systems must decrease in size while increasing in intelligence. Micro-electromechanical systems (MEMS) are one such technology that the Army and Department of Defense will rely on heavily to achieve these objectives. Current and future military applications of MEMS devices include safety and arming devices, fuzing devices, various guidance systems, sensors/detectors, inertial measurement units, tracking devices, radio frequency devices, wireless RFIDs and network systems, GPSs, radar systems, mobile base systems, satellites, missiles and the like.

  4. Passive and Active Vibrations Allow Self-Organization in Large-Scale Electromechanical Systems

    NASA Astrophysics Data System (ADS)

    Buscarino, Arturo; Fortuna, Carlo Famoso Luigi; Frasca, Mattia

    2016-06-01

    In this paper, the role of passive and active vibrations for the control of nonlinear large-scale electromechanical systems is investigated. The mathematical model of the system is discussed and detailed experimental results are shown in order to prove that coupling the effects of feedback and vibrations elicited by proper control signals makes possible to regularize imperfect uncertain large-scale systems.

  5. Stabilization of multimodal electromechanical oscillations by coordinated application of power system stabilizers

    SciTech Connect

    Ostojic, D.R. )

    1991-11-01

    This paper presents a hybrid methodology which utilizes modal sensitivity and frequency domain analysis to coordinate power system stabilizers in multimachine systems. The proposed approach permits robust stabilization of multimodal electromechanical oscillations by the minimal number of coordinated stabilizers. A spectral monitoring technique is used for the fast examination of performance of coordinated stabilizers in the non-linear power system.

  6. Failure analysis for micro-electrical-mechanical systems (MEMS)

    SciTech Connect

    Peterson, K.A.; Tangyunyong, P.; Barton, D.L.

    1997-10-01

    Micro-Electrical Mechanical Systems (MEMS) is an emerging technology with demonstrated potential for a wide range of applications including sensors and actuators for medical, industrial, consumer, military, automotive and instrumentation products. Failure analysis (FA) of MEMS is critically needed for the successful design, fabrication, performance analysis and reliability assurance of this new technology. Many devices have been examined using techniques developed for integrated circuit analysis, including optical inspection, scanning laser microscopy (SLM), scanning electron microscopy (SEM), focused ion beam (FIB) techniques, atomic force microscopy (AFM), infrared (IR) microscopy, light emission (LE) microscopy, acoustic microscopy and acoustic emission analysis. For example, the FIB was used to microsection microengines that developed poor performance characteristics. Subsequent SEM analysis clearly demonstrated the absence of wear on gear, hub, and pin joint bearing surfaces, contrary to expectations. Another example involved the use of infrared microscopy for thermal analysis of operating microengines. Hot spots were located, which did not involve the gear or hub, but indicated contact between comb structures which drive microengines. Voltage contrast imaging proved useful on static and operating MEMS in both the SEM and the FIB and identified electrostatic clamping as a potentially significant contributor to failure mechanisms in microengines. This work describes MEMS devices, FA techniques, failure modes, and examples of FA of MEMS.

  7. Energy behavior of an electromechanical system with internal impacts and uncertainties

    NASA Astrophysics Data System (ADS)

    Lima, Roberta; Sampaio, Rubens

    2016-07-01

    This paper analyzes the maximal energy stored in an elastic barrier due to the impacts of a pendulum fitted within a vibro-impact electromechanical system considering the existence of epistemic uncertainties in the system parameters. The vibro-impact electromechanical system is composed of two subsystems. The first subsystem is the electromechanical system composed by a motor, cart and pendulum, and the second is an elastic barrier. The first will be called striker system. The pendulum is fitted within the cart. Its suspension point is fixed in the cart, so that it may exist a relative motion between cart and pendulum. The influence of the DC motor in the dynamic behavior of the pendulum is considered. The coupling between the motor and the cart is made by a scotch yoke mechanism, so that the motor rotational motion is transformed in horizontal cart motion over a rail. The pendulum is modeled as a mathematical pendulum (bar without mass and particle of mass mp at the end). A flexible barrier, placed inside the cart, constrains the pendulum motion. Due to the relative motion between the cart and the pendulum, impacts may occur between these two elements. The objective of the paper is to analyze the energy stored in the barrier due to impacts as a function of some parameters of the electromechanical system from a deterministic and from a stochastic viewpoint. The system is designed as an aid in drilling. The impacts damage or fracture the rock and facilitate the conventional drilling.

  8. Reconfigurable Array Antenna Using Microelectromechanical Systems (MEMS) Actuators

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.; Chun, Donghoon; Katehi, Linda P. B.

    2001-01-01

    The paper demonstrates a patch antenna integrated with a novel microelectromechanical systems (MEMS) actuator for reconfiguring the operating frequency. Experimental results demonstrate that the center frequency can be reconfigured by as much as 1.6 percent of the nominal operating frequency at K-Band In addition, a novel on-wafer antenna pattern measurement technique is demonstrated.

  9. Advanced electro-mechanical micro-shutters for thermal infrared night vision imaging and targeting systems

    NASA Astrophysics Data System (ADS)

    Durfee, David; Johnson, Walter; McLeod, Scott

    2007-04-01

    Un-cooled microbolometer sensors used in modern infrared night vision systems such as driver vehicle enhancement (DVE) or thermal weapons sights (TWS) require a mechanical shutter. Although much consideration is given to the performance requirements of the sensor, supporting electronic components and imaging optics, the shutter technology required to survive in combat is typically the last consideration in the system design. Electro-mechanical shutters used in military IR applications must be reliable in temperature extremes from a low temperature of -40°C to a high temperature of +70°C. They must be extremely light weight while having the ability to withstand the high vibration and shock forces associated with systems mounted in military combat vehicles, weapon telescopic sights, or downed unmanned aerial vehicles (UAV). Electro-mechanical shutters must have minimal power consumption and contain circuitry integrated into the shutter to manage battery power while simultaneously adapting to changes in electrical component operating parameters caused by extreme temperature variations. The technology required to produce a miniature electro-mechanical shutter capable of fitting into a rifle scope with these capabilities requires innovations in mechanical design, material science, and electronics. This paper describes a new, miniature electro-mechanical shutter technology with integrated power management electronics designed for extreme service infra-red night vision systems.

  10. Development of Microelectromechanical Systems (MEMS) forceps for intraocular surgery

    PubMed Central

    Bhisitkul, R B; Keller, C G

    2005-01-01

    Aim: To develop silicon microforceps for intraocular surgery using Microelectromechanical Systems (MEMS) technology, the application of microchip fabrication techniques for the production of controllable three dimensional devices on the micrometre scale. Methods: Prototype MEMS forceps were designed and manufactured for intraocular surgery. Scanning electron microscopy was used to evaluate device tip construction. Designs using both thermal expansion actuators and conventional mechanical activation were tested in human cadaver eyes and in vivo rabbit eyes to assess functionality in standard vitreoretinal surgery. Results: MEMS forceps were constructed with various tip designs ranging from 100 μm to 2 mm in length. Scanning electron microscopy confirmed accurate construction of micro features such as forceps teeth as small as tens of micrometres. In surgical testing, the silicon forceps tips were effective in surgical manoeuvres, including grasping retinal membranes and excising tissue. The mechanical actuator design on a 20 gauge handle was more operational in the intraocular environment than the thermal expansion actuator design. While handheld operation was possible, the precision of the forceps was best exploited when mounted on a three axis micromanipulator. Conclusion: MEMS microforceps are feasible for conventional vitreoretinal surgery, and offer advances in terms of small scale, operating precision, and construction tolerance. PMID:16299136

  11. Observability analysis of a MEMS INS/GPS integration system with gyroscope G-sensitivity errors.

    PubMed

    Fan, Chen; Hu, Xiaoping; He, Xiaofeng; Tang, Kanghua; Luo, Bing

    2014-08-28

    Gyroscopes based on micro-electromechanical system (MEMS) technology suffer in high-dynamic applications due to obvious g-sensitivity errors. These errors can induce large biases in the gyroscope, which can directly affect the accuracy of attitude estimation in the integration of the inertial navigation system (INS) and the Global Positioning System (GPS). The observability determines the existence of solutions for compensating them. In this paper, we investigate the observability of the INS/GPS system with consideration of the g-sensitivity errors. In terms of two types of g-sensitivity coefficients matrix, we add them as estimated states to the Kalman filter and analyze the observability of three or nine elements of the coefficient matrix respectively. A global observable condition of the system is presented and validated. Experimental results indicate that all the estimated states, which include position, velocity, attitude, gyro and accelerometer bias, and g-sensitivity coefficients, could be made observable by maneuvering based on the conditions. Compared with the integration system without compensation for the g-sensitivity errors, the attitude accuracy is raised obviously.

  12. Observability Analysis of a MEMS INS/GPS Integration System with Gyroscope G-Sensitivity Errors

    PubMed Central

    Fan, Chen; Hu, Xiaoping; He, Xiaofeng; Tang, Kanghua; Luo, Bing

    2014-01-01

    Gyroscopes based on micro-electromechanical system (MEMS) technology suffer in high-dynamic applications due to obvious g-sensitivity errors. These errors can induce large biases in the gyroscope, which can directly affect the accuracy of attitude estimation in the integration of the inertial navigation system (INS) and the Global Positioning System (GPS). The observability determines the existence of solutions for compensating them. In this paper, we investigate the observability of the INS/GPS system with consideration of the g-sensitivity errors. In terms of two types of g-sensitivity coefficients matrix, we add them as estimated states to the Kalman filter and analyze the observability of three or nine elements of the coefficient matrix respectively. A global observable condition of the system is presented and validated. Experimental results indicate that all the estimated states, which include position, velocity, attitude, gyro and accelerometer bias, and g-sensitivity coefficients, could be made observable by maneuvering based on the conditions. Compared with the integration system without compensation for the g-sensitivity errors, the attitude accuracy is raised obviously. PMID:25171122

  13. 41. View of electro/mechanical fiber optic system panel in transmitter ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    41. View of electro/mechanical fiber optic system panel in transmitter building no. 102. Images projected to screen (panel at upper left) are projected to back side of screen located in MWOC to display changing information. - Clear Air Force Station, Ballistic Missile Early Warning System Site II, One mile west of mile marker 293.5 on Parks Highway, 5 miles southwest of Anderson, Anderson, Denali Borough, AK

  14. Wearable Wireless Telemetry System for Implantable BioMEMS Sensors

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.; Miranda, Felix A.; Wilson, Jeffrey D.; Simons, Renita E.

    2008-01-01

    Telemetry systems of a type that have been proposed for the monitoring of physiological functions in humans would include the following subsystems: Surgically implanted or ingested units that would comprise combinations of microelectromechanical systems (MEMS)- based sensors [bioMEMS sensors] and passive radio-frequency (RF) readout circuits that would include miniature loop antennas. Compact radio transceiver units integrated into external garments for wirelessly powering and interrogating the implanted or ingested units. The basic principles of operation of these systems are the same as those of the bioMEMS-sensor-unit/external-RFpowering- and-interrogating-unit systems described in "Printed Multi-Turn Loop Antennas for Biotelemetry" (LEW-17879-1) NASA Tech Briefs, Vol. 31, No. 6 (June 2007), page 48, and in the immediately preceding article, "Hand-Held Units for Short-Range Wireless Biotelemetry" (LEW-17483-1). The differences between what is reported here and what was reported in the cited prior articles lie in proposed design features and a proposed mode of operation. In a specific system of the type now proposed, the sensor unit would comprise mainly a capacitive MEMS pressure sensor located in the annular region of a loop antenna (more specifically, a square spiral inductor/ antenna), all fabricated as an integral unit on a high-resistivity silicon chip. The capacitor electrodes, the spiral inductor/antenna, and the conductor lines interconnecting them would all be made of gold. The dimensions of the sensor unit have been estimated to be about 110.4 mm. The external garment-mounted powering/ interrogating unit would include a multi-turn loop antenna and signal-processing circuits. During operation, this external unit would be positioned in proximity to the implanted or ingested unit to provide for near-field, inductive coupling between the loop antennas, which we have as the primary and secondary windings of an electrical transformer.

  15. Microelectromechanical Systems (MEMS) Actuator for Reconfigurable Patch Antenna Demonstrated

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.

    2001-01-01

    A microstrip patch antenna with two contact actuators along the radiating edges for frequency reconfiguration was demonstrated at K-band frequencies. The layout of the antenna is shown in the following figure. This antenna has the following advantages over conventional semiconductor varactor-diode-tuned patch antennas: 1. By eliminating the semiconductor diode and its nonlinear I-V characteristics, the antenna minimizes intermodulation signal distortion. This is particularly important in digital wireless systems, which are sensitive to intersymbol interference caused by intermodulation products. 2. Because the MEMS actuator is an electrostatic device, it does not draw any current during operation and, hence, requires a negligible amount of power for actuation. This is an important advantage for hand-held, battery-operated, portable wireless systems since the battery does not need to be charged frequently. 3. The MEMS actuator does not require any special epitaxial layers as in the case of diodes and, hence, is cost effective.

  16. Opportunities and challenges for MEMS technology in Army missile systems applications

    NASA Astrophysics Data System (ADS)

    Ruffin, Paul B.

    1999-07-01

    The military market drives the thrust for the development of robust, high performance MicroElectroMechanical Systems (MEMS) devices with applications such as: competent and smart munitions, aircraft and missile autopilots, tactical missile guidance, fire control systems, platform stabilization, smart structures with embedded inertial sensors, missile system health monitoring, aerodynamic flow control, and multiple intelligent small projectiles. Army missile applications will be a fertile market for MEMS products, such as MEMS-based inertial sensors. MEMS technology should significantly enhance performance and provide more robust mission capability in applications where arrays of MEMS devices are required. The Army Aviation and Missile Command Missile Research, Development, and Engineering Center is working diligently with other government agencies, academia, and industry to develop high performing MEMS devices to withstand shock, vibration, temperature, humidity, and long-term storage conditions often encountered by Army missile systems. The goals of the ongoing DARPA MEMS technology programs will meet a significant portion of the Army missile systems requirements. In lieu of presenting an all-inclusive review of Army MEMS applications, this paper addresses a number of opportunities and associated challenges for MEMS systems operating in military environments. Near term applications and the less mature, high-risk applications of MEMS devices are addressed.

  17. Issues on utility management simulation system for miscellaneous airborne electromechanical devices

    NASA Astrophysics Data System (ADS)

    Chen, Juan; Liu, Qiaozhen; Wang, Zhanlin

    2006-11-01

    UMS for miscellaneous airborne electromechanical devices is the part and parcel of VMS. The object of utility management is airborne electromechanical devices which ensure that air engine, avionics and other systems work in order. This paper works over several items about UMS by introducing advanced simulation and its correlative technologies. Firstly, message transmission software of 1553B bus is designed and the bus characteristics are tested. Also, the problem of time synchronization is solved by testing network delay. Secondly, in order to obtain high performance of distributed process ability, heuristic job dispatching algorithm and hydrodynamic load balancing strategy are adopted, which solve the static job dispatch and dynamic job scheduling respectively. The hydrodynamic load balancing strategy is aiming to fulfill the resources usage in the whole system and accomplishes best resources sharing. Thirdly, this paper establishes and realizes the demo environment for visual simulation of the electromechanical subsystems. Adopting tree-mode during the software design makes the system scalable and reconstruction. As multithreading synchronization is resolved, real-time performance of simulation. is ensured during.

  18. Promising future energy storage systems: Nanomaterial based systems, Zn-air, and electromechanical batteries

    NASA Astrophysics Data System (ADS)

    Koopman, R.; Richardson, J.

    1993-10-01

    Future energy storage systems will require longer shelf life, higher duty cycles, higher efficiency, higher energy and power densities, and be fabricated in an environmentally conscious process. This paper describes several possible future systems which have the potential of providing stored energy for future electric and hybrid vehicles. Three of the systems have their origin in the control of material structure at the molecular level and the subsequent nanoengineering into useful device and components: aerocapacitors, nanostructure multilayer capacitors, and the lithium ion battery. The zinc-air battery is a high energy density battery which can provide vehicles with long range (400 km in autos) and be rapidly refueled with a slurry of zinc particles and electrolyte. The electromechanical battery is a battery-sized module containing a high-speed rotor integrated with an iron-less generator mounted on magnetic bearings and housed in an evacuated chamber.

  19. Promising future energy storage systems: Nanomaterial based systems, Zn-air and electromechanical batteries

    SciTech Connect

    Koopman, R.; Richardson, J.

    1993-10-01

    Future energy storage systems will require longer shelf life, higher duty cycles, higher efficiency, higher energy and power densities, and be fabricated in an environmentally conscious process. This paper describes several possible future systems which have the potential of providing stored energy for future electric and hybrid vehicles. Three of the systems have their origin in the control of material structure at the molecular level and the subsequent nanoengineering into useful device and components: aerocapacitors, nanostructure multilayer capacitors, and the lithium ion battery. The zinc-air battery is a high energy density battery which can provide vehicles with long range (400 km in autos) and be rapidly refueled with a slurry of zinc particles and electrolyte. The electromechanical battery is a battery-sized module containing a high-speed rotor integrated with an iron-less generator mounted on magnetic bearings and housed in an evacuated chamber.

  20. MEMS Louvers for Thermal Control

    NASA Technical Reports Server (NTRS)

    Champion, J. L.; Osiander, R.; Darrin, M. A. Garrison; Swanson, T. D.

    1998-01-01

    Mechanical louvers have frequently been used for spacecraft and instrument thermal control purposes. These devices typically consist of parallel or radial vanes, which can be opened or closed to vary the effective emissivity of the underlying surface. This project demonstrates the feasibility of using Micro-Electromechanical Systems (MEMS) technology to miniaturize louvers for such purposes. This concept offers the possibility of substituting the smaller, lighter weight, more rugged, and less costly MEMS devices for such mechanical louvers. In effect, a smart skin that self adjusts in response to environmental influences could be developed composed of arrays of thousands of miniaturized louvers. Several orders of magnitude size, weight, and volume decreases are potentially achieved using micro-electromechanical techniques. The use of this technology offers substantial benefits in spacecraft/instrument design, integration and testing, and flight operations. It will be particularly beneficial for the emerging smaller spacecraft and instruments of the future. In addition, this MEMS thermal louver technology can form the basis for related spacecraft instrument applications. The specific goal of this effort was to develop a preliminary MEMS device capable of modulating the effective emissivity of radiators on spacecraft. The concept pursued uses hinged panels, or louvers, in a manner such that heat emitted from the radiators is a function of louver angle. An electrostatic comb drive or other such actuator can control the louver position. The initial design calls for the louvers to be gold coated while the underlying surface is of high emissivity. Since, the base MEMS material, silicon, is transparent in the InfraRed (IR) spectrum, the device has a minimum emissivity when closed and a maximum emissivity when open. An initial set of polysilicon louver devices was designed at the Johns Hopkins Applied Physics Laboratory in conjunction with the Thermal Engineering Branch at

  1. Modelling, Simulation, Animation, and Real-Time Control (Mosart) for a Class of Electromechanical Systems: A System-Theoretic Approach

    ERIC Educational Resources Information Center

    Rodriguez, Armando A.; Metzger, Richard P.; Cifdaloz, Oguzhan; Dhirasakdanon, Thanate; Welfert, Bruno

    2004-01-01

    This paper describes an interactive modelling, simulation, animation, and real-time control (MoSART) environment for a class of 'cart-pendulum' electromechanical systems that may be used to enhance learning within differential equations and linear algebra classes. The environment is useful for conveying fundamental mathematical/systems concepts…

  2. Embedded intelligent adaptive PI controller for an electromechanical system.

    PubMed

    El-Nagar, Ahmad M

    2016-09-01

    In this study, an intelligent adaptive controller approach using the interval type-2 fuzzy neural network (IT2FNN) is presented. The proposed controller consists of a lower level proportional - integral (PI) controller, which is the main controller and an upper level IT2FNN which tuning on-line the parameters of a PI controller. The proposed adaptive PI controller based on IT2FNN (API-IT2FNN) is implemented practically using the Arduino DUE kit for controlling the speed of a nonlinear DC motor-generator system. The parameters of the IT2FNN are tuned on-line using back-propagation algorithm. The Lyapunov theorem is used to derive the stability and convergence of the IT2FNN. The obtained experimental results, which are compared with other controllers, demonstrate that the proposed API-IT2FNN is able to improve the system response over a wide range of system uncertainties. PMID:27342993

  3. Electromechanical switch

    NASA Astrophysics Data System (ADS)

    Antonuzzi, Anthony P.; Carignan, Donald J.

    1986-06-01

    A hardened electromechanical switch is disclosed. When appropriate electrical contacts and pick-offs are aligned, four switches close. The possible number of switch combinations selectable are 4095 based upon a base eight counting system. The switch has a counter section and a memory section. The counter section uses an odometer like device based upon octal. Each counter wheel of the counter section has an electrical pick-off that interacts with the memory section. In the memory section, a plurality of octal numbers, four, are entered into and locked thereon such that each counter set disk, four, therein has one octal number thereon. Electrical contacts are placed on the counter set disks of the memory section and these touch the pick-offs of the counter wheels which will simultaneously close on the four contacts of the counter set disk in only one of the 4095 combinations noted above.

  4. A MEMS-based miniature DNA analysis system

    SciTech Connect

    Northrup, M.A.; Gonzalez, C.; Hadley, D.

    1995-04-25

    We detail the design and development of a miniature thermal cycling instrument for performing the polymerase chain reaction (PCR) that uses microfabricated, silicon-based reaction chambers. The MEMS-based, battery-operated instrument shows significant improvements over commercial thermal cycling instrumentation. Several different biological systems have been amplified and verified with the miniature PCR instrument including the Human Immunodeficiency Virus; both cloned and genomic DNA templates of {beta} globin; and the genetic disease, Cystic Fibrosis from human DNA. The miniaturization of a PCR thermal cycler is the initial module of a fully-integrated portable, low-power, rapid, and highly efficient bioanalytical instrument.

  5. An implantable pressure sensing system with electromechanical interrogation scheme.

    PubMed

    Kim, Albert; Powell, C R; Ziaie, Babak

    2014-07-01

    In this paper, we report on the development of an implantable pressure sensing system that is powered by mechanical vibrations in the audible acoustic frequency range. This technique significantly enhances interrogation range, alleviates the misalignment issues commonly encountered with inductive powering, and simplifies the external receiver circuitry. The interrogation scheme consists of two phases: a mechanical vibration phase and an electrical radiation phase. During the first phase, a piezoelectric cantilever acts as an acoustic receiver and charges a capacitor by converting sound vibration harmonics occurring at its resonant frequency into electrical power. In the subsequent electrical phase, when the cantilever is not vibrating, the stored electric charge is discharged across an LC tank whose inductor is pressure sensitive; hence, when the LC tank oscillates at its natural resonant frequency, it radiates a high-frequency signal that is detectable using an external receiver and its frequency corresponds to the measured pressure. The pressure sensitive inductor consists of a planar coil (single loop of wire) with a ferrite core whose distance to the coil varies with applied pressure. A prototype of the implantable pressure sensor is fabricated and tested, both in vitro and in vivo (swine bladder). A pressure sensitivity of 1 kHz/cm H2O is achieved with minimal misalignment sensitivity (26% drop at 90° misalignment between the implanted device and acoustic source; 60% drop at 90° misalignment between the implanted device and RF receiver coil).

  6. Brain cancer mortality at a manufacturer of aerospace electromechanical systems.

    PubMed

    Park, R M; Silverstein, M A; Green, M A; Mirer, F E

    1990-01-01

    Standardized proportional mortality ratios and mortality odds ratios were calculated for 583 deaths between 1950 and 1986 among employees who had worked for at least 10 years at a facility manufacturing missile and aircraft guidance systems. There was a statistically significant excess of brain cancer proportional mortality (PMR = 16/3.8 = 4.2, p = .0001). Among hourly employees, 12 brain cancer deaths occurred for 2.7 expected (PMR = 4.4, p = .00005). The PMR for brain cancer increased from 1.8 (p = .45) among hourly workers with less than 20 years to 8.7 (p = .000003) in those with more than 20 years employment. Work in "clean rooms," where gyroscopes were assembled, was associated with the brain cancer excess but did not fully account for it. Among 105 deceased hourly women, all three brain cancer deaths occurred among gyro assemblers working in clean rooms, and the risk increased with duration in clean rooms. Although the proportion of brain cancer deaths among hourly men with clean-room experience was similar to that for women, only three of the seven male brain cancer deaths occurred in this group. The suspect agents include gyro fluids and chlorofluorocarbon solvents.

  7. Ultra-Precise Assembly of Micro-Electromechanical Systems (MEMS) Components

    SciTech Connect

    Feddema, J.T.; Simon, R.; Polosky, M.; Christenson, T.

    1999-04-01

    This report summarizes a three year effort to develop an automated microassembly workcell for the assembly of LIGA (Lithography Galvonoforming Abforming) parts. Over the last several years, Sandia has developed processes for producing surface machined silicon and LIGA parts for use in weapons surety devices. Some of these parts have outside dimensions as small as 100 micron, and most all have submicron tolerances. Parts this small and precise are extremely difficult to assembly by hand. Therefore, in this project, we investigated the technologies required to develop a robotic workcell to assembly these parts. In particular, we concentrated on micro-grippers, visual servoing, micro-assembly planning, and parallel assembly. Three different micro-grippers were tested: a pneumatic probe, a thermally actuated polysilicon tweezer, and a LIGA fabricated tweezer. Visual servoing was used to accuracy position two parts relative to one another. Fourier optics methods were used to generate synthetic microscope images from CAD drawings. These synthetic images are used off-line to test image processing routines under varying magnifications and depths of field. They also provide reference image features which are used to visually servo the part to the desired position. We also investigated a new aspect of fine motion planning for the micro-domain. As parts approach 1-10 {micro}m or less in outside dimensions, interactive forces such as van der Waals and electrostatic forces become major factors which greatly change the assembly sequence and path plans. We developed the mathematics required to determine the goal regions for pick up, holding, and release of a micro-sphere being handled by a rectangular tool. Finally, we implemented and tested the ability to assemble an array of LIGA parts attached to two 3 inch diameter wafers. In this way, hundreds of parts can be assembled in parallel rather than assembling each part individually.

  8. MEMS- and NEMS-based smart devices and systems

    NASA Astrophysics Data System (ADS)

    Varadan, Vijay K.

    2001-11-01

    The microelectronics industry has seen explosive growth during the last thirty years. Extremely large markets for logic and memory devices have driven the development of new materials, and technologies for the fabrication of even more complex devices with features sized now don at the sub micron and nanometer level. Recent interest has arisen in employing these materials, tools and technologies for the fabrication of miniature sensors and actuators and their integration with electronic circuits to produce smart devices and systems. This effort offers the promise of: 1) increasing the performance and manufacturability of both sensors and actuators by exploiting new batch fabrication processes developed including micro stereo lithographic an micro molding techniques; 2) developing novel classes of materials and mechanical structures not possible previously, such as diamond like carbon, silicon carbide and carbon nanotubes, micro-turbines and micro-engines; 3) development of technologies for the system level and wafer level integration of micro components at the nanometer precision, such as self-assembly techniques and robotic manipulation; 4) development of control and communication systems for MEMS devices, such as optical and RF wireless, and power delivery systems, etc. A novel composite structure can be tailored by functionalizing carbon nano tubes and chemically bonding them with the polymer matrix e.g. block or graft copolymer, or even cross-linked copolymer, to impart exceptional structural, electronic and surface properties. Bio- and Mechanical-MEMS devices derived from this hybrid composite provide a new avenue for future smart systems. The integration of NEMS (NanoElectroMechanical Systems), MEMS, IDTs (Interdigital Transducers) and required microelectronics and conformal antenna in the multifunctional smart materials and composites results in a smart system suitable for sensing and control of a variety functions in automobile, aerospace, marine and civil

  9. Research on MEMS sensor in hydraulic system flow detection

    NASA Astrophysics Data System (ADS)

    Zhang, Hongpeng; Zhang, Yindong; Liu, Dong; Ji, Yulong; Jiang, Jihai; Sun, Yuqing

    2010-12-01

    With the development of mechatronics technology and fault diagnosis theory, people regard flow information much more than before. Cheap, fast and accurate flow sensors are urgently needed by hydraulic industry. So MEMS sensor, which is small, low cost, well performed and easy to integrate, will surely play an important role in this field. Based on the new method of flow measurement which was put forward by our research group, this paper completed the measurement of flow rate in hydraulic system by setting up the mathematical model, using numerical simulation method and doing physical experiment. Based on viscous fluid flow equations we deduced differential pressure-velocity model of this new sensor and did optimization on parameters. Then, we designed and manufactured the throttle and studied the velocity and pressure field inside the sensor by FLUENT. Also in simulation we get the differential pressure-velocity curve .The model machine was simulated too to direct experiment. In the static experiments we calibrated the MEMS sensing element and built some sample sensors. Then in a hydraulic testing system we compared the sensor signal with a turbine meter. It presented good linearity and could meet general hydraulic system use. Based on the CFD curves, we analyzed the error reasons and made some suggestion to improve. In the dynamic test, we confirmed this sensor can realize high frequency flow detection by a 7 piston-pump.

  10. Research on MEMS sensor in hydraulic system flow detection

    NASA Astrophysics Data System (ADS)

    Zhang, Hongpeng; Zhang, Yindong; Liu, Dong; Ji, Yulong; Jiang, Jihai; Sun, Yuqing

    2011-05-01

    With the development of mechatronics technology and fault diagnosis theory, people regard flow information much more than before. Cheap, fast and accurate flow sensors are urgently needed by hydraulic industry. So MEMS sensor, which is small, low cost, well performed and easy to integrate, will surely play an important role in this field. Based on the new method of flow measurement which was put forward by our research group, this paper completed the measurement of flow rate in hydraulic system by setting up the mathematical model, using numerical simulation method and doing physical experiment. Based on viscous fluid flow equations we deduced differential pressure-velocity model of this new sensor and did optimization on parameters. Then, we designed and manufactured the throttle and studied the velocity and pressure field inside the sensor by FLUENT. Also in simulation we get the differential pressure-velocity curve .The model machine was simulated too to direct experiment. In the static experiments we calibrated the MEMS sensing element and built some sample sensors. Then in a hydraulic testing system we compared the sensor signal with a turbine meter. It presented good linearity and could meet general hydraulic system use. Based on the CFD curves, we analyzed the error reasons and made some suggestion to improve. In the dynamic test, we confirmed this sensor can realize high frequency flow detection by a 7 piston-pump.

  11. Microelectromechanical Systems (MEMS) Broadband Light Source Developed

    NASA Technical Reports Server (NTRS)

    Tuma, Margaret L.

    2003-01-01

    A miniature, low-power broadband light source has been developed for aerospace applications, including calibrating spectrometers and powering miniature optical sensors. The initial motivation for this research was based on flight tests of a Fabry-Perot fiberoptic temperature sensor system used to detect aircraft engine exhaust gas temperature. Although the feasibility of the sensor system was proven, the commercial light source optically powering the device was identified as a critical component requiring improvement. Problems with the light source included a long stabilization time (approximately 1 hr), a large amount of heat generation, and a large input electrical power (6.5 W). Thus, we developed a new light source to enable the use of broadband optical sensors in aerospace applications. Semiconductor chip-based light sources, such as lasers and light-emitting diodes, have a relatively narrow range of emission wavelengths in comparison to incandescent sources. Incandescent light sources emit broadband radiation from visible to infrared wavelengths; the intensity at each wavelength is determined by the filament temperature and the materials chosen for the filament and the lamp window. However, present commercial incandescent light sources are large in size and inefficient, requiring several watts of electrical power to obtain the desired optical power, and they emit a large percentage of the input power as heat that must be dissipated. The miniature light source, developed jointly by the NASA Glenn Research Center, the Jet Propulsion Laboratory, and the Lighting Innovations Institute, requires one-fifth the electrical input power of some commercial light sources, while providing similar output light power that is easily coupled to an optical fiber. Furthermore, it is small, rugged, and lightweight. Microfabrication technology was used to reduce the size, weight, power consumption, and potential cost-parameters critical to future aerospace applications. This chip

  12. Summary of Field Measurement on UF6 Cylinders Using Electro-Mechanically Cooled Systems

    SciTech Connect

    McGinnis, Brent R; Smith, Steven E; Solodov, Alexander A; Whitaker, J Michael; Morgan, James B; MayerII, Richard L.; Montgomery, J. Brent

    2009-01-01

    Measurement of the enrichment of solid state UF6 stored within large metal cylinders is a task commonly performed by plant operators and inspectors. The measurement technologies typically used range from low-resolution, high-efficiency sodium iodide detectors to high-resolution, moderate-efficiency high-purity germanium (HPGe) detectors. The technology used and methods deployed are dependent upon the material being measured, environmental conditions, time constraints, and measurement-precision requirements. Operators and inspectors typically use specially designed, HPGe detectors that are cooled with liquid nitrogen in situations where high-resolution measurements are required. However, the requirement for periodically refilling the system with liquid nitrogen makes remote usage cumbersome and slow. The task of cooling the detector reduces the available time for the inspector to perform other safeguards activities while on site. If the inspector has to reduce the count time for each selected cylinder to ensure that all preselected cylinders are measured during the inspection, the resulting measurement uncertainties may be increased, making it more difficult to detect and verify potential discrepancies in the operator's declarations. However, recent advances in electromechanically cooled HPGe detectors may provide the inspector with an improved verification tool by eliminating the need for liquid nitrogen. This report provides a summary of test results for field measurements performed using electromechanically cooled HPGe detectors on depleted, natural, and low-enriched uranium cylinders. The results of the study provide valuable information to inspectors and operators regarding the capabilities and limitations of electromechanically cooled systems based on true field-measurement conditions.

  13. Mass determination with the magnetic levitation method—proposal for a new design of electromechanical system

    NASA Astrophysics Data System (ADS)

    Kajastie, H.; Riski, K.; Satrapinski, A.

    2009-06-01

    The method for realization of the kilogram using 'superconducting magnetic levitation' was re-evaluated at MIKES. The realization of the kilogram based on the traditional levitation method is limited by the imperfections of the superconducting materials and the indefinable dependence between supplied electrical energy and the gravitational potential energy of the superconducting mass. This indefiniteness is proportional to the applied magnetic field and is caused by increasing losses and trapped magnetic fluxes. A new design of an electromechanical system for the levitation method is proposed. In the proposed system the required magnetic field and the corresponding force are reduced, as the mass of the body (hanging from a mass comparator) is compensated by the reference weight on the mass comparator. The direction of the magnetic force can be upward (levitation force, when the body is over the coil) or downward (repulsive force, when the body is under the coil). The initial force to move the body from the coil is not needed and magnetic field sensitivity is increased, providing linearization of displacement versus applied current. This new construction allows a lower magnetic induction, reduces energy losses compared with previous designs of electromechanical system and reduces the corresponding systematic error.

  14. Combined photonics and MEMs function demonstration

    SciTech Connect

    Blum, O.; Warren, M.E.; Hou, H.Q.; Choquette, K.D.; Rogers, M.S.; Sniegowski, J.J.; Carson, R.F.

    1998-01-01

    The authors have recently demonstrated two prototypes where photonics and microelectromechanical system (MEMs) technologies have been integrated to show proof-of-principle functionality for weapon surety functions. These activities are part of a program which is exploring the miniaturization of electromechanical components for making weapon systems safer. Such miniaturization can lead to a low-cost, small, high-performance ``systems-on-a-chip``, and have many applications ranging from advanced military systems to large-volume commercial markets like automobiles, rf or land-based communications networks and equipment, or commercial electronics. One of the key challenges in realization of the microsystem is integration of several technologies including digital electronics; analog and rf electronics, optoelectronics (light emitting and detecting devices and circuits), sensors and actuators, and advanced packaging technologies. In this work the authors describe efforts in integrating MEMs and photonic functions and the fabrication constraints on both system components. Here, they discuss two examples of integration of MEMs and a photonic device. In the first instance, a MEMs locking device pin is driven by a voltage generated by photovoltaic cells connected in series, which are driven by a laser. In the second case, a VCSEL emitting at 1.06 {micro}m is packaged together with a metallized MEMs shutter. By appropriate alignment to the opening in the shutter, the VCSEL is turned on and off by the movement of the Si chopper wheel.

  15. Designing power system simulators for the smart grid: combining controls, communications, and electro-mechanical dynamics

    SciTech Connect

    Nutaro, James J

    2011-01-01

    Open source software has a leading role in research on simulation technology for electrical power systems. Research simulators demonstrate new features for which there is nascent but growing demand not yet provided for by commercial simulators. Of particular interest is the inclusion of models of software-intensive and communication-intensive controls in simulations of power system transients. This paper describes two features of the ORNL power system simulator that help it meet this need. First is its use of discrete event simulation for all aspects of the model: control, communication, and electro-mechanical dynamics. Second is an interoperability interface that enables the ORNL power system simulator to be integrated with existing, discrete event simulators of digital communication systems. The paper concludes with a brief discussion of how these aspects of the ORNL power system simulator might be inserted into production-grade simulation tools.

  16. Distributed electromechanical actuation system design for a morphing trailing edge wing

    NASA Astrophysics Data System (ADS)

    Dimino, I.; Diodati, G.; Concilio, A.; Volovick, A.; Zivan, L.

    2016-04-01

    Next-generation flight control actuation technology will be based on "more electric" concepts to ensure benefits in terms of efficiency, weight and maintenance. This paper is concerned with the design of an un-shafted distributed servo-electromechanical actuation system, suited for morphing trailing edge wings of large commercial aircraft. It aims at producing small wing camber variations in the range between -5° and +5° in cruise, to enable aerodynamic efficiency improvements. The deployment kinematics is based on multiple "direct-drive" actuation, each made of light-weight compact lever mechanisms, rigidly connected to compliant ribs and sustained by load-bearing motors. Navier-Stokes computations are performed to estimate the pressure distribution over the interested wing region and the resulting hinge moments. These transfer to the primary structure via the driving mechanism. An electro-mechanical Matlab/Simulink model of the distributed actuation architecture is developed and used as a design tool, to preliminary evaluate the complete system performance. Implementing a multi-shaft strategy, each actuator is sized for the torque acting on the respective adaptive rib, following the effect of both the aerodynamic pressure and the morphing skin stiffness. Elastic trailing edge rotations and power needs are evaluated in operative conditions. Focus is finally given to the key challenges of the proposed concept: targeting quantifiable performance improvements while being compliant to the demanding requirements in terms of reliability and safety.

  17. An investigation of the dynamic electromechanical coupling effects in machine drive systems driven by asynchronous motors

    NASA Astrophysics Data System (ADS)

    Szolc, Tomasz; Konowrocki, Robert; Michajłow, Maciej; Pręgowska, Agnieszka

    2014-12-01

    In the paper dynamic electromechanical interaction between the rotating machine drive system and the electric driving motor is considered. The investigations are performed by means of the circuit model of the asynchronous motor as well as using an advanced structural hybrid model of the drive system. Using the analytical solutions applied for the electrical and the mechanical systems the electromagnetic stiffness and coefficient of damping, both generated by the electric motor rotationally interacting with the mechanical system of the given dynamic properties, were determined. By means of experimentally validated computational responses obtained for torsional harmonic excitation induced by the driven machine working tool, a modification of dynamic properties of the mechanical system by the electromagnetic flux between the stator and the rotor has been studied.

  18. An electromechanical material testing system for in situ electron microscopy and applications

    PubMed Central

    Zhu, Yong; Espinosa, Horacio D.

    2005-01-01

    We report the development of a material testing system for in situ electron microscopy (EM) mechanical testing of nanostructures. The testing system consists of an actuator and a load sensor fabricated by means of surface micromachining. This previously undescribed nanoscale material testing system makes possible continuous observation of the specimen deformation and failure with subnanometer resolution, while simultaneously measuring the applied load electronically with nanonewton resolution. This achievement was made possible by the integration of electromechanical and thermomechanical components based on microelectromechanical system technology. The system capabilities are demonstrated by the in situ EM testing of free-standing polysilicon films, metallic nanowires, and carbon nanotubes. In particular, a previously undescribed real-time instrumented in situ transmission EM observation of carbon nanotubes failure under tensile load is presented here. PMID:16195381

  19. Carbon material based microelectromechanical system (MEMS): Fabrication and devices

    NASA Astrophysics Data System (ADS)

    Xu, Wenjun

    This PhD dissertation presents the exploration and development of two carbon materials, carbon nanotubes (CNTs) and carbon fiber (CF), as either key functional components or unconventional substrates for a variety of MEMS applications. Their performance in three different types of MEMS devices, namely, strain/stress sensors, vibration-powered generators and fiber solar cells, were evaluated and the working mechanisms of these two non-traditional materials in these systems were discussed. The work may potentially enable the development of new types of carbon-MEMS devices. Carbon nanotubes were selected from the carbon family due to several advantageous characteristics that this nanomaterial offers. They carry extremely high mechanical strength (Ey=1TPa), superior electrical properties (current density of 4x109 A/cm2), exceptional piezoresistivity (G=2900), and unique spatial format (high aspect ratio hollow nanocylinder), among other properties. If properly utilized, all these merits can give rise to a variety of new types of carbon nanotube based micro- and nanoelectronics that can greatly fulfill the need for the next generation of faster, smaller and better devices. However, before these functions can be fully realized, one substantial issue to cope with is how to implement CNTs into these systems in an effective and controllable fashion. Challenges associated with CNTs integration include very poor dispersibility in solvents, lack of melting/sublimation point, and unfavorable rheology with regard to mixing and processing highly viscous, CNT-loaded polymer solutions. These issues hinder the practical progress of CNTs both in a lab scale and in the industrial level. To this end, a MEMS-assisted electrophoretic deposition technique was developed, aiming to achieve controlled integration of CNT into both conventional and flexible microsystems at room temperature with a relatively high throughput. MEMS technology has demonstrated strong capability in developing

  20. MEMS (Micro-Electro-Mechanical Systems) for Automotive and Consumer Electronics

    NASA Astrophysics Data System (ADS)

    Marek, Jiri; Gómez, Udo-Martin

    MEMS sensors gained over the last two decades an impressive width of applications: (a) ESP: A car is skidding and stabilizes itself without driver intervention (b) Free-fall detection: A laptop falls to the floor and protects the hard drive by parking the read/write drive head automatically before impact. (c) Airbag: An airbag fires before the driver/occupant involved in an impending automotive crash impacts the steering wheel, thereby significantly reducing physical injury risk. MEMS sensors are sensing the environmental conditions and are giving input to electronic control systems. These crucial MEMS sensors are making system reactions to human needs more intelligent, precise, and at much faster reaction rates than humanly possible. Important prerequisites for the success of sensors are their size, functionality, power consumption, and costs. This technical progress in sensor development is realized by micro-machining. The development of these processes was the breakthrough to industrial mass-production for micro-electro-mechanical systems (MEMS). Besides leading-edge micromechanical processes, innovative and robust ASIC designs, thorough simulations of the electrical and mechanical behaviour, a deep understanding of the interactions (mainly over temperature and lifetime) of the package and the mechanical structures are needed. This was achieved over the last 20 years by intense and successful development activities combined with the experience of volume production of billions of sensors. This chapter gives an overview of current MEMS technology, its applications and the market share. The MEMS processes are described, and the challenges of MEMS, compared to standard IC fabrication, are discussed. The evolution of MEMS requirements is presented, and a short survey of MEMS applications is shown. Concepts of newest inertial sensors for ESP-systems are given with an emphasis on the design concepts of the sensing element and the evaluation circuit for achieving

  1. Wearable Wireless Telemetry System for Implantable Bio-MEMS Sensors

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.; Miranda, Felix A.; Wilson, Jeffrey D.; Simons, Renita E.

    2006-01-01

    In this paper, a telemetry and contact-less powering system consisting of an implantable bio-MEMS sensor with a miniature printed square spiral chip antenna and an external wearable garment with printed loop antenna is investigated. The wearable garment pick-up antenna and the implantable chip antenna are in close proximity to each other and hence couple inductively through their near-fields and behave as the primary and the secondary circuits of a transformer, respectively. The numerical and experimental results are graphically presented, and include the design parameter values as a function of the geometry, the relative RF magnetic near-field intensity as a function of the distance and angle, and the current density on the strip conductors, for the implantable chip antenna.

  2. Wearable wireless telemetry system for implantable bio-MEMS sensors.

    PubMed

    Simons, Rainee N; Miranda, Félix A; Wilson, Jeffrey D; Simons, Renita E

    2006-01-01

    In this paper, a telemetry and contact-less powering system consisting of an implantable bio-MEMS sensor with a miniature printed square spiral chip antenna and an external wearable garment with printed loop antenna is investigated. The implantable chip antenna and the wearable garment pick-up antenna are in close proximity to each other and hence couple inductively through their near-fields and behave as the primary and the secondary circuits of a transformer, respectively. The numerical and experimental results are graphically presented, and include the design parameter values as a function of the geometry and the relative magnetic near-field intensity as a function of the angle, for the implantable chip antenna.

  3. Wearable wireless telemetry system for implantable bio-MEMS sensors.

    PubMed

    Simons, Rainee N; Miranda, Félix A; Wilson, Jeffrey D; Simons, Renita E

    2006-01-01

    In this paper, a telemetry and contact-less powering system consisting of an implantable bio-MEMS sensor with a miniature printed square spiral chip antenna and an external wearable garment with printed loop antenna is investigated. The implantable chip antenna and the wearable garment pick-up antenna are in close proximity to each other and hence couple inductively through their near-fields and behave as the primary and the secondary circuits of a transformer, respectively. The numerical and experimental results are graphically presented, and include the design parameter values as a function of the geometry and the relative magnetic near-field intensity as a function of the angle, for the implantable chip antenna. PMID:17946365

  4. Nanoscale Electromechanics of Ferroelectric and Biological Systems: A New Dimension in Scanning Probe Microscopy

    SciTech Connect

    Kalinin, Sergei V; Rodriguez, Brian J; Jesse, Stephen; Karapetian, Edgar; Mirman, B; Eliseev, E. A.; Morozovska, A. N.

    2007-01-01

    Functionality of biological and inorganic systems ranging from nonvolatile computer memories and microelectromechanical systems to electromotor proteins and cellular membranes is ultimately based on the intricate coupling between electrical and mechanical phenomena. In the past decade, piezoresponse force microscopy (PFM) has been established as a powerful tool for nanoscale imaging, spectroscopy, and manipulation of ferroelectric and piezoelectric materials. Here, we give an overview of the fundamental image formation mechanism in PFM and summarize recent theoretical and technological advances. In particular, we show that the signal formation in PFM is complementary to that in the scanning tunneling microscopy (STM) and atomic force microscopy (AFM) techniques, and we discuss the implications. We also consider the prospect of extending PFM beyond ferroelectric characterization for quantitative probing of electromechanical behavior in molecular and biological systems and high-resolution probing of static and dynamic polarization switching processes in low-dimensional ferroelectric materials and heterostructures.

  5. Application of MEMS blazed gratings in WDM

    NASA Astrophysics Data System (ADS)

    Wu, Yongfeng; Yu, Honglin; Kang, Zhiping

    2009-05-01

    For the shortage and limitation of ruled grating that have ghost lines and stray light because of period error and ruling irregularity, a method for making a wavelength division multiplexer (WDM) based on Micro Electro-Mechanical System (MEMS) blazed grating is proposed. The basic composition of WDM based on MEMS blazed grating is introduced according to the method. The process realizing MEMS blazed grating and means for improving diffraction efficiency are also introduced. MEMS blazed grating is numerical simulated and analyzed in laboratory virtual instrument engineering workbench (LabVIEW), the diffraction intensity distribution of blazed grating is presented, it is shown that the blazed grating, period is 2000nm and blazed angle is 20 degree, have the best division effect for light wave with wavelength about 1.55μm by the results. At the same time, the 3D layout of WDM is provided in ZEMAX, and the rays in WDM are traced also. It is indicated by the results when the channel spacing is greater than or equal to 50nm, the division effect is in evidence. It achieves the capability of Coarse Wavelength Division Multiplexing (CWDM). It is proved that MEMS blazed grating can be applied well in WDM by all the results.

  6. A High-order Eulerian-Lagrangian Finite Element Method for Coupled Electro-mechanical Systems

    NASA Astrophysics Data System (ADS)

    Brandstetter, Gerd

    The main focus of this work is on the development of a high-order Eulerian-Lagrangian finite element method for the simulation of electro-mechanical systems. The coupled problem is solved by a staggered scheme, where the mechanical motion is discretized by standard Lagrangian finite elements, and the electrical field is solved on a fixed Eulerian grid with embedded boundary conditions. Traditional Lagrangian-Lagrangian or arbitrary Lagrangian-Eulerian (ALE) methods encounter deficiencies, for example, when dealing with mesh distortion due to large deformations, or topology changes due to contacting bodies. The presented Eulerian-Lagrangian approach addresses these issues in a natural way. Within this context we develop a high-order immersed boundary discontinuous-Galerkin (IB-DG) method, which is shown to be necessary for (i) the accurate representation of the electrical gradient along nonlinear boundary features such as singular corners, and (ii) to achieve full convergence during the iterative global solution. We develop an implicit scheme based on the mid-point rule, as well as an explicit scheme based on the centered-difference method, with the incorporation of energy conserving, frictionless contact algorithms for an elastic-to-rigid-surface contact. The performance of the proposed method is assessed for several benchmark tests: the electro-static force vector around a singular corner, the quasi-static pull-in of an electro-mechanically actuated switch, the excitation of a carbon nanotube at resonance, and the cyclic impact simulation of a micro-electro-mechanical resonant-switch. We report improved accuracy for the high-order method as compared to low-order methods, and linear convergence in the iterative solution of the staggered scheme. Additionally, we investigate a Newton-Krylov shooting scheme in order to directly find cyclic steady states of electro-mechanical devices excited at resonance-- as opposed to a naive time-stepping from zero initial

  7. The Development of a Portable Hard Disk Encryption/Decryption System with a MEMS Coded Lock

    PubMed Central

    Zhang, Weiping; Chen, Wenyuan; Tang, Jian; Xu, Peng; Li, Yibin; Li, Shengyong

    2009-01-01

    In this paper, a novel portable hard-disk encryption/decryption system with a MEMS coded lock is presented, which can authenticate the user and provide the key for the AES encryption/decryption module. The portable hard-disk encryption/decryption system is composed of the authentication module, the USB portable hard-disk interface card, the ATA protocol command decoder module, the data encryption/decryption module, the cipher key management module, the MEMS coded lock controlling circuit module, the MEMS coded lock and the hard disk. The ATA protocol circuit, the MEMS control circuit and AES encryption/decryption circuit are designed and realized by FPGA(Field Programmable Gate Array). The MEMS coded lock with two couplers and two groups of counter-meshing-gears (CMGs) are fabricated by a LIGA-like process and precision engineering method. The whole prototype was fabricated and tested. The test results show that the user's password could be correctly discriminated by the MEMS coded lock, and the AES encryption module could get the key from the MEMS coded lock. Moreover, the data in the hard-disk could be encrypted or decrypted, and the read-write speed of the dataflow could reach 17 MB/s in Ultra DMA mode. PMID:22291566

  8. Electromechanical cryocooler

    DOEpatents

    Neufeld, K.W.

    1996-12-10

    An electromechanical cryocooler is disclosed for substantially reducing vibrations caused by the cooler. The direction of the force of the vibrations is measured and a counterforce sufficient to substantially reduce this vibration is calculated and generated. The counterforce is 180{degree} out of phase with the direction of the force of the vibrations. 3 figs.

  9. Electromechanical cryocooler

    DOEpatents

    Neufeld, Kenneth W.

    1996-01-01

    An electromechanical cryocooler is disclosed for substantially reducing vibrations caused by the cooler. The direction of the force of the vibrations is measured and a counterforce sufficient to substantially reduce this vibration is calculated and generated. The counterforce is 180.degree. out of phase with the direction of the force of the vibrations.

  10. Electromechanical Technician.

    ERIC Educational Resources Information Center

    Ohio State Univ., Columbus. Center on Education and Training for Employment.

    This document contains 25 units to consider for use in a tech prep competency profile for the occupation of electromechanical technician. All the units listed will not necessarily apply to every situation or tech prep consortium, nor will all the competencies within each unit be appropriate. Several units appear within each specific occupation and…

  11. Reliability Testing Procedure for MEMS IMUs Applied to Vibrating Environments

    PubMed Central

    De Pasquale, Giorgio; Somà, Aurelio

    2010-01-01

    The diffusion of micro electro-mechanical systems (MEMS) technology applied to navigation systems is rapidly increasing, but currently, there is a lack of knowledge about the reliability of this typology of devices, representing a serious limitation to their use in aerospace vehicles and other fields with medium and high requirements. In this paper, a reliability testing procedure for inertial sensors and inertial measurement units (IMU) based on MEMS for applications in vibrating environments is presented. The sensing performances were evaluated in terms of signal accuracy, systematic errors, and accidental errors; the actual working conditions were simulated by means of an accelerated dynamic excitation. A commercial MEMS-based IMU was analyzed to validate the proposed procedure. The main weaknesses of the system have been localized by providing important information about the relationship between the reliability levels of the system and individual components. PMID:22315550

  12. MEMS Microshutter Array System for James Webb Space Telescope

    NASA Technical Reports Server (NTRS)

    Li, Mary J.; Adachi, Tomoko; Allen, Christine; Babu, Sachi; Bajikar, Sateesh; Beamesderfer, Michael; Bradley, Ruth; Denis, Kevin; Costen, Nick; Ewin, Audrey; Franz, Dave; Hess, Larry; Hu, Ron; Jackson, Kamili; Jhabvala, Murzy; Kelly, Dan; King, Todd; Kletetschka, Gunther; Kutyrev, Alexander; Lynch, Barney; Miller, Timothy; Moseley, Harvey; Mikula, Vilem; Mott. Brent; Oh, Lance

    2008-01-01

    A complex MEMS microshutter array system has been developed at NASA Goddard Space Flight Center (GSFC) for use as a multi-object aperture array for a Near-Infrared Spectrometer (NIRSpec). The NIRSpec is one of the four major instruments carried by the James Webb Space Telescope (JWST), the next generation of space telescope after the Hubble Space Telescope retires. The microshutter arrays (MSAs) are designed for the selective transmission of light with high efficiency and high contrast. It is demonstrated in Figure 1 how a MSA is used as a multiple object selector in deep space. The MSAs empower the NIRSpec instrument simultaneously collect spectra from more than 100 targets therefore increases the instrument efficiency 100 times or more. The MSA assembly is one of three major innovations on JWST and the first major MEMS devices serving observation missions in space. The MSA system developed at NASA GSFC is assembled with four quadrant fully addressable 365x171 shutter arrays that are actuated magnetically, latched and addressed electrostatically. As shown in Figure 2, each MSA is fabricated out of a 4' silicon-on-insulator (SOI) wafer using MEMS bulk-micromachining technology. Individual shutters are close-packed silicon nitride membranes with a pixel size close to 100x200 pm (Figure 3). Shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. In order to prevent light leak, light shields are made on to the surrounding frame of each shutter to cover the gaps between the shutters and the Game (Figure 4). Micro-ribs and sub-micron bumps are tailored on hack walls and light shields, respectively, to prevent sticktion, shown in Figures 4 and 5. JWST instruments are required to operate at cryogenic temperatures as low as 35K, though they are to be subjected to various levels of ground tests at room temperature. The shutters should therefore maintain nearly flat in the entire temperature range

  13. MEMS compatible illumination and imaging micro-optical systems

    NASA Astrophysics Data System (ADS)

    Bräuer, A.; Dannberg, P.; Duparré, J.; Höfer, B.; Schreiber, P.; Scholles, M.

    2007-01-01

    The development of new MOEMS demands for cooperation between researchers in micromechanics, optoelectronics and microoptics at a very early state. Additionally, microoptical technologies being compatible with structured silicon have to be developed. The microoptical technologies used for two silicon based microsystems are described in the paper. First, a very small scanning laser projector with a volume of less than 2 cm 3, which operates with a directly modulated lasers collimated with a microlens, is shown. The laser radiation illuminates a 2D-MEMS scanning mirror. The optical design is optimized for high resolution (VGA). Thermomechanical stability is realized by design and using a structured ceramics motherboard. Secondly, an ultrathin CMOS-camera having an insect inspired imaging system has been realized. It is the first experimental realization of an artificial compound eye. Micro-optical design principles and technology is used. The overall thickness of the imaging system is only 320 μm, the diagonal field of view is 21°, and the f-number is 2.6. The monolithic device consists of an UV-replicated microlens array upon a thin silica substrate with a pinhole array in a metal layer on the back side. The pitch of the pinholes differs from that of the lens array to provide individual viewing angle for each channel. The imaging chip is directly glued to a CMOS sensor with adapted pitch. The whole camera is less than 1mm thick. New packaging methods for these systems are under development.

  14. MEMS CHIP CO2 SENSOR FOR BUILDING SYSTEMS INTEGRATION

    SciTech Connect

    Anton Carl Greenwald

    2005-09-14

    The objective of this research was to develop an affordable, reliable sensor to enable demand controlled ventilation (DCV). A significant portion of total energy consumption in the United States is used for heating or air conditioning (HVAC) buildings. To assure occupant safety and fresh air levels in large buildings, and especially those with sealed windows, HVAC systems are frequently run in excess of true requirements as automated systems cannot now tell the occupancy level of interior spaces. If such a sensor (e.g. thermostat sized device) were available, it would reduce energy use between 10 and 20% in such buildings. A quantitative measure of ''fresh air'' is the concentration of carbon dioxide (CO{sub 2}) present. An inert gas, CO{sub 2} is not easily detected by chemical sensors and is usually measured by infrared spectroscopy. Ion Optics research developed a complete infrared sensor package on a single MEMS chip. It contains the infrared (IR) source, IR detector and IR filter. The device resulting from this DOE sponsored research has sufficient sensitivity, lifetime, and drift rate to meet the specifications of commercial instrument manufacturers who are now testing the device for use in their building systems.

  15. An integrated thermal compensation system for MEMS inertial sensors.

    PubMed

    Chiu, Sheng-Ren; Teng, Li-Tao; Chao, Jen-Wei; Sue, Chung-Yang; Lin, Chih-Hsiou; Chen, Hong-Ren; Su, Yan-Kuin

    2014-03-04

    An active thermal compensation system for a low temperature-bias-drift (TBD) MEMS-based gyroscope is proposed in this study. First, a micro-gyroscope is fabricated by a high-aspect-ratio silicon-on-glass (SOG) process and vacuum packaged by glass frit bonding. Moreover, a drive/readout ASIC, implemented by the 0.25 µm 1P5M standard CMOS process, is designed and integrated with the gyroscope by directly wire bonding. Then, since the temperature effect is one of the critical issues in the high performance gyroscope applications, the temperature-dependent characteristics of the micro-gyroscope are discussed. Furthermore, to compensate the TBD of the micro-gyroscope, a thermal compensation system is proposed and integrated in the aforementioned ASIC to actively tune the parameters in the digital trimming mechanism, which is designed in the readout ASIC. Finally, some experimental results demonstrate that the TBD of the micro-gyroscope can be compensated effectively by the proposed compensation system.

  16. An Integrated Thermal Compensation System for MEMS Inertial Sensors

    PubMed Central

    Chiu, Sheng-Ren; Teng, Li-Tao; Chao, Jen-Wei; Sue, Chung-Yang; Lin, Chih-Hsiou; Chen, Hong-Ren; Su, Yan-Kuin

    2014-01-01

    An active thermal compensation system for a low temperature-bias-drift (TBD) MEMS-based gyroscope is proposed in this study. First, a micro-gyroscope is fabricated by a high-aspect-ratio silicon-on-glass (SOG) process and vacuum packaged by glass frit bonding. Moreover, a drive/readout ASIC, implemented by the 0.25 μm 1P5M standard CMOS process, is designed and integrated with the gyroscope by directly wire bonding. Then, since the temperature effect is one of the critical issues in the high performance gyroscope applications, the temperature-dependent characteristics of the micro-gyroscope are discussed. Furthermore, to compensate the TBD of the micro-gyroscope, a thermal compensation system is proposed and integrated in the aforementioned ASIC to actively tune the parameters in the digital trimming mechanism, which is designed in the readout ASIC. Finally, some experimental results demonstrate that the TBD of the micro-gyroscope can be compensated effectively by the proposed compensation system. PMID:24599191

  17. Technical Challenges in Reliable Microelectronics Packaging of Microelectromechanical Systems (MEMS) for Space Applications

    NASA Technical Reports Server (NTRS)

    Ramesham, Rajeshuni

    2000-01-01

    MEMS have shown a significant promise in the last decade for a variety of applications such as air-bag, pressure sensors, accelerometer, microgyro, chemical sensors, artificial nose, etc. Standard semiconductor microelectronics packaging needs the integrated circuits (IC) to be protected from the harsh environment, and provide electrical communication with the other parts of the circuit, facilitate thermal dissipation efficiently, and impart mechanical strength to the silicon die. Microelectronics packaging involves wafer dicing, bonding, lead attachment, encapsulation to protect from the environment, electrical integrity, and package leak tests to assure the reliable IC packaging technology. Active elements or microstructures in MEMS devices often interfaces with the hostile environment where packaging leak tests and testing of such devices using chemical and mechanical parameters will be very difficult and expensive. Packaging of MEMS is significantly complex as they serve to protect from the environment and microstructures interact with the same environment to measure or affect the desired physical or chemical parameters. The most of the silicon circuitry is sensitive to temperature, moisture, magnetic field, light, and electromagnetic interference. The package must then protect the on-board silicon circuitry while simultaneously exposing the microsensor to the effect it measures to assure the packaging technology of MEMS. MEMS technology has a major application in developing a microspacecraft for space systems provided reliability of MEMS packaging technology is sufficiently addressed. This MEMS technology would eventually miniaturize many of the components of the spacecraft to reach the NASA's goal by building faster, cheaper, better, smaller spacecraft to explore the space more effectively. This paper discusses the latest developments in the MEMS technology and challenging technical issues in the packaging of hermetically sealed and non-hermetically sealed

  18. Electromechanical systems with transient high power response operating from a resonant AC link

    NASA Technical Reports Server (NTRS)

    Burrows, Linda M.; Hansen, Irving G.

    1992-01-01

    The combination of an inherently robust asynchronous (induction) electrical machine with the rapid control of energy provided by a high frequency resonant AC link enables the efficient management of higher power levels with greater versatility. This could have a variety of applications from launch vehicles to all-electric automobiles. These types of systems utilize a machine which is operated by independent control of both the voltage and frequency. This is made possible by using an indirect field-oriented control method which allows instantaneous torque control in all four operating quadrants. Incorporating the AC link allows the converter in these systems to switch at the zero crossing of every half cycle of the AC waveform. This zero loss switching of the link allows rapid energy variations to be achieved without the usual frequency proportional switching loss. Several field-oriented control systems were developed by LeRC and General Dynamics Space Systems Division under contract to NASA. A description of a single motor, electromechanical actuation system is presented. Then, focus is on a conceptual design for an AC electric vehicle. This design incorporates an induction motor/generator together with a flywheel for peak energy storage. System operation and implications along with the associated circuitry are addressed. Such a system would greatly improve all-electric vehicle ranges over the Federal Urban Driving Cycle (FUD).

  19. System and method of active vibration control for an electro-mechanically cooled device

    DOEpatents

    Lavietes, Anthony D.; Mauger, Joseph; Anderson, Eric H.

    2000-01-01

    A system and method of active vibration control of an electro-mechanically cooled device is disclosed. A cryogenic cooling system is located within an environment. The cooling system is characterized by a vibration transfer function, which requires vibration transfer function coefficients. A vibration controller generates the vibration transfer function coefficients in response to various triggering events. The environments may differ by mounting apparatus, by proximity to vibration generating devices, or by temperature. The triggering event may be powering on the cooling system, reaching an operating temperature, or a reset action. A counterbalance responds to a drive signal generated by the vibration controller, based on the vibration signal and the vibration transfer function, which adjusts vibrations. The method first places a cryogenic cooling system within a first environment and then generates a first set of vibration transfer function coefficients, for a vibration transfer function of the cooling system. Next, the cryogenic cooling system is placed within a second environment and a second set of vibration transfer function coefficients are generated. Then, a counterbalance is driven, based on the vibration transfer function, to reduce vibrations received by a vibration sensitive element.

  20. Performance of a MEMS-base Adaptive Optics Optical Coherency Tomography System

    SciTech Connect

    Evans, J; Zadwadzki, R J; Jones, S; Olivier, S; Opkpodu, S; Werner, J S

    2008-01-16

    We have demonstrated that a microelectrical mechanical systems (MEMS) deformable mirror can be flattened to < 1 nm RMS within controllable spatial frequencies over a 9.2-mm aperture making it a viable option for high-contrast adaptive optics systems (also known as Extreme Adaptive Optics). The Extreme Adaptive Optics Testbed at UC Santa Cruz is being used to investigate and develop technologies for high-contrast imaging, especially wavefront control. A phase shifting diffraction interferometer (PSDI) measures wavefront errors with sub-nm precision and accuracy for metrology and wavefront control. Consistent flattening, required testing and characterization of the individual actuator response, including the effects of dead and low-response actuators. Stability and repeatability of the MEMS devices was also tested. An error budget for MEMS closed loop performance will summarize MEMS characterization.

  1. Measurements of nanoresonator-qubit interactions in a hybrid quantum electromechanical system.

    PubMed

    Rouxinol, F; Hao, Y; Brito, F; Caldeira, A O; Irish, E K; LaHaye, M D

    2016-09-01

    Experiments to probe the basic quantum properties of motional degrees of freedom of mechanical systems have developed rapidly over the last decade. One promising approach is to use hybrid electromechanical systems incorporating superconducting qubits and microwave circuitry. However, a critical challenge facing the development of these systems is to achieve strong coupling between mechanics and qubits while simultaneously reducing coupling of both the qubit and mechanical mode to the environment. Here we report measurements of a qubit-coupled mechanical resonator system consisting of an ultra-high-frequency nanoresonator and a long coherence-time superconducting transmon qubit, embedded in a superconducting coplanar waveguide cavity. It is demonstrated that the nanoresonator and transmon have commensurate energies and transmon coherence times are one order of magnitude larger than for all previously reported qubit-coupled nanoresonators. Moreover, we show that numerical simulations of this new hybrid quantum system are in good agreement with spectroscopic measurements and suggest that the nanoresonator in our device resides at low thermal occupation number, near its ground state, acting as a dissipative bath seen by the qubit. We also outline how this system could soon be developed as a platform for implementing more advanced experiments with direct relevance to quantum information processing and quantum thermodynamics, including the study of nanoresonator quantum noise properties, reservoir engineering, and nanomechanical quantum state generation and detection. PMID:27483428

  2. Measurements of nanoresonator-qubit interactions in a hybrid quantum electromechanical system

    NASA Astrophysics Data System (ADS)

    Rouxinol, F.; Hao, Y.; Brito, F.; Caldeira, A. O.; Irish, E. K.; LaHaye, M. D.

    2016-09-01

    Experiments to probe the basic quantum properties of motional degrees of freedom of mechanical systems have developed rapidly over the last decade. One promising approach is to use hybrid electromechanical systems incorporating superconducting qubits and microwave circuitry. However, a critical challenge facing the development of these systems is to achieve strong coupling between mechanics and qubits while simultaneously reducing coupling of both the qubit and mechanical mode to the environment. Here we report measurements of a qubit-coupled mechanical resonator system consisting of an ultra-high-frequency nanoresonator and a long coherence-time superconducting transmon qubit, embedded in a superconducting coplanar waveguide cavity. It is demonstrated that the nanoresonator and transmon have commensurate energies and transmon coherence times are one order of magnitude larger than for all previously reported qubit-coupled nanoresonators. Moreover, we show that numerical simulations of this new hybrid quantum system are in good agreement with spectroscopic measurements and suggest that the nanoresonator in our device resides at low thermal occupation number, near its ground state, acting as a dissipative bath seen by the qubit. We also outline how this system could soon be developed as a platform for implementing more advanced experiments with direct relevance to quantum information processing and quantum thermodynamics, including the study of nanoresonator quantum noise properties, reservoir engineering, and nanomechanical quantum state generation and detection.

  3. An Integrated MEMS Sensor Cluster System for Aerospace Applications

    NASA Technical Reports Server (NTRS)

    Kahng, Seun; Scott, Michael A.; Beeler, George B.; Bartlett, James E.; Collins, Richard S.

    2000-01-01

    Efforts to reduce viscous drag on airfoils could results in a considerable saving for the operation of flight vehicles including those of space transportation. This reduction of viscous drag effort requires measurement and active control of boundary layer flow property on an airfoil. Measurement of viscous drag of the boundary layer flow over an airfoil with minimal flow disturbance is achievable with newly developed MEMS sensor clusters. These sensor clusters provide information that can be used to actively control actuators to obtain desired flow properties or design a vehicle to satisfy particular boundary layer flow criteria. A series of MEMS sensor clusters has been developed with a data acquisition and control module for local measurements of shear stress, pressure, and temperature on an airfoil. The sensor cluster consists of two shear stress sensors, two pressure sensors, and two temperature sensors on a surface area of 1.24 mm x 1.86 mm. Each sensor is 300 microns square and is placed on a flexible polyimide sheet. The shear stress sensor is a polysilicon hot-film resistor, which is insulated by a vacuum cavity of 200 x 200 x 2 microns. The pressure sensors are silicon piezoresistive type, and the temperature sensors are also hot film polysilicon resistors. The total size of the cluster including sensors and electrical leads is 1 Omm x 1 Omm x 0.1 mm. A typical sensitivity of shear stress sensor is 150 mV/Pascal, the pressure sensors are an absolute type with a measurement range from 9 to 36 psia with 0.8mV/V/psi sensitivity, and the temperature sensors have a measurement resolution of 0.1 degree C. The sensor clusters are interfaced to a data acquisition and control module that consists of two custom ASICs (Application Specific Integrated Circuits) and a micro-controller. The data acquisition and control module transfers data to a host PC that configures and controls a total of three sensor clusters. Functionality of the entire system has been tested in

  4. Electromechanical acoustic liner

    NASA Technical Reports Server (NTRS)

    Sheplak, Mark (Inventor); Cattafesta, III, Louis N. (Inventor); Nishida, Toshikazu (Inventor); Horowitz, Stephen Brian (Inventor)

    2007-01-01

    A multi-resonator-based system responsive to acoustic waves includes at least two resonators, each including a bottom plate, side walls secured to the bottom plate, and a top plate disposed on top of the side walls. The top plate includes an orifice so that a portion of an incident acoustical wave compresses gas in the resonators. The bottom plate or the side walls include at least one compliant portion. A reciprocal electromechanical transducer coupled to the compliant portion of each of the resonators forms a first and second transducer/compliant composite. An electrical network is disposed between the reciprocal electromechanical transducer of the first and second resonator.

  5. Giant Piezoelectricity on Si for Hyperactive MEMS

    NASA Astrophysics Data System (ADS)

    Baek, S. H.; Park, J.; Kim, D. M.; Aksyuk, V. A.; Das, R. R.; Bu, S. D.; Felker, D. A.; Lettieri, J.; Vaithyanathan, V.; Bharadwaja, S. S. N.; Bassiri-Gharb, N.; Chen, Y. B.; Sun, H. P.; Folkman, C. M.; Jang, H. W.; Kreft, D. J.; Streiffer, S. K.; Ramesh, R.; Pan, X. Q.; Trolier-McKinstry, S.; Schlom, D. G.; Rzchowski, M. S.; Blick, R. H.; Eom, C. B.

    2011-11-01

    Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO3 template layer with superior piezoelectric coefficients (e31,f = -27 ± 3 coulombs per square meter) and figures of merit for piezoelectric energy-harvesting systems. We have incorporated these heterostructures into microcantilevers that are actuated with extremely low drive voltage due to thin-film piezoelectric properties that rival bulk PMN-PT single crystals. These epitaxial heterostructures exhibit very large electromechanical coupling for ultrasound medical imaging, microfluidic control, mechanical sensing, and energy harvesting.

  6. Electromechanical simulation and test of rotating systems with magnetic bearing or piezoelectric actuator active vibration control

    NASA Technical Reports Server (NTRS)

    Palazzolo, Alan B.; Tang, Punan; Kim, Chaesil; Manchala, Daniel; Barrett, Tim; Kascak, Albert F.; Brown, Gerald; Montague, Gerald; Dirusso, Eliseo; Klusman, Steve

    1994-01-01

    This paper contains a summary of the experience of the authors in the field of electromechanical modeling for rotating machinery - active vibration control. Piezoelectric and magnetic bearing actuator based control are discussed.

  7. Flight Test Experience with an Electromechanical Actuator on the F-18 Systems Research Aircraft

    NASA Technical Reports Server (NTRS)

    Jensen, Stephen C.; Jenney, Gavin D.; Raymond, Bruce; Dawson, David; Flick, Brad (Technical Monitor)

    2000-01-01

    Development of reliable power-by-wire actuation systems for both aeronautical and space applications has been sought recently to eliminate hydraulic systems from aircraft and spacecraft and thus improve safety, efficiency, reliability, and maintainability. The Electrically Powered Actuation Design (EPAD) program was a joint effort between the Air Force, Navy, and NASA to develop and fly a series of actuators validating power-by-wire actuation technology on a primary flight control surface of a tactical aircraft. To achieve this goal, each of the EPAD actuators was installed in place of the standard hydraulic actuator on the left aileron of the NASA F/A-18B Systems Research Aircraft (SRA) and flown throughout the SRA flight envelope. Numerous parameters were recorded, and overall actuator performance was compared with the performance of the standard hydraulic actuator on the opposite wing. This paper discusses the integration and testing of the EPAD electromechanical actuator (EMA) on the SRA. The architecture of the EMA system is discussed, as well as its integration with the F/A-18 Flight Control System. The flight test program is described, and actuator performance is shown to be very close to that of the standard hydraulic actuator it replaced. Lessons learned during this program are presented and discussed, as well as suggestions for future research.

  8. Flight Test Experience With an Electromechanical Actuator on the F-18 Systems Research Aircraft

    NASA Technical Reports Server (NTRS)

    Jensen, Stephen C.; Jenney, Gavin D.; Raymond, Bruce; Dawson, David

    2000-01-01

    Development of reliable power-by-wire actuation systems for both aeronautical and space applications has been sought recently to eliminate hydraulic systems from aircraft and spacecraft and thus improve safety, efficiency, reliability, and maintainability. The Electrically Powered Actuation Design (EPAD) program was a joint effort between the Air Force, Navy, and NASA to develop and fly a series of actuators validating power-by-wire actuation technology on a primary flight control surface of a tactical aircraft. To achieve this goal, each of the EPAD actuators was installed in place of the standard hydraulic actuator on the left aileron of the NASA F/A-18B Systems Research Aircraft (SRA) and flown throughout the SRA flight envelope. Numerous parameters were recorded, and overall actuator performance was compared with the performance of the standard hydraulic actuator on the opposite wing. This paper discusses the integration and testing of the EPAD electromechanical actuator (EMA) on the SRA. The architecture of the EMA system is discussed, as well as its integration with the F/A-18 Flight Control System. The flight test program is described, and actuator performance is shown to be very close to that of the standard hydraulic actuator it replaced. Lessons learned during this program are presented and discussed, as well as suggestions for future research.

  9. Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device

    NASA Technical Reports Server (NTRS)

    Ramesham, R.

    1999-01-01

    The measurement of acceleration has been accomplished using several technologies in high-reliability applications such as guidance control, detonation, and shock/vibration measurement. Electromechanical, piezoelectric, piezoresistive, and capacitive acceleration sensors are available and the literature pertinent to giant magnetoresistive sensors (GMR) for the above applications are scanty.

  10. Simulation of an Electromechanical Spin Motor System of a Control Moment Gyroscope

    NASA Technical Reports Server (NTRS)

    Inampudi, Ravi; Gordeuk, John

    2016-01-01

    A two-phase brushless DC motor (BDCM) with pulse-width modulated (PWM) voltage drive is simulated to control the flywheel speed of a control moment gyroscope (CMG). An overview of a double-gimballed control moment gyroscope (DGCMG) assembly is presented along with the CMG torque effects on the spacecraft. The operating principles of a two-phase brushless DC motor are presented and the system's electro-mechanical equations of motion are developed for the root-mean-square (RMS) currents and wheel speed. It is shown that the system is an extremely "stiff" set of first-order equations for which an implicit Euler integrator is required for a stable solution. An adaptive proportional voltage controller is presented which adjusts the PWM voltages depending on several control modes for speed, current, and torque. The simulation results illustrate the interaction between the electrical system and the load dynamics and how these influence the overall performance of the system. As will be shown, the CMG spin motor model can directly provide electrical power use and thermal power output to spacecraft subsystems for effective (average) calculations of CMG power consumption.

  11. Design of virtual display and testing system for moving mass electromechanical actuator

    NASA Astrophysics Data System (ADS)

    Gao, Zhigang; Geng, Keda; Zhou, Jun; Li, Peng

    2015-12-01

    Aiming at the problem of control, measurement and movement virtual display of moving mass electromechanical actuator(MMEA), the virtual testing system of MMEA was developed based on the PC-DAQ architecture and the software platform of LabVIEW, and the comprehensive test task such as drive control of MMEA, tests of kinematic parameter, measurement of centroid position and virtual display of movement could be accomplished. The system could solve the alignment for acquisition time between multiple measurement channels in different DAQ cards, then on this basis, the researches were focused on the dynamic 3D virtual display by the LabVIEW, and the virtual display of MMEA were realized by the method of calling DLL and the method of 3D graph drawing controls. Considering the collaboration with the virtual testing system, including the hardware drive, the measurement software of data acquisition, and the 3D graph drawing controls method was selected, which could obtained the synchronization measurement, control and display. The system can measure dynamic centroid position and kinematic position of movable mass block while controlling the MMEA, and the interface of 3D virtual display has realistic effect and motion smooth, which can solve the problem of display and playback about MMEA in the closed shell.

  12. Micro-electro-mechanical systems (MEMS) for enzymatic detection

    NASA Astrophysics Data System (ADS)

    Jeetender, Amritsar; Packirisamy, Muthukumaran; Stiharu, Ion G.; Balagopal, Ganesharam

    2004-08-01

    Early enzymatic identification and confirmation is essential for diagnosis and prevention as in the case of Acute Myocardial Infarction (AMI). Biochemical markers continue to be an important clinical tool for the enzymatic detection. The advent of MEMS devices can enable the use of various microstructures for the detection of enzymes. In this study, the concept of MEMS is applied for the detection of enzyme reaction, in which microcantilevers undergo changes in mechanical behavior that can be optically detected when enzyme molecules adsorb on their surface. This paper presents the static behavior of microcantilevers under Horse Radish Peroxide (HRP) enzyme reaction. The reported experimental results provide valuable information that will be useful in the development of MEMS sensors for enzymatic detection. The surface stress produced due to enzyme reactions results in the bending of cantilevers as similar to the influencing of thermal stress in the cantilevers. This paper also reports the influence of thermal gradient on the microcantilevers.

  13. Softening and Hardening of a Micro-electro-mechanical systems (MEMS) Oscillator in a Nonlinear Regime

    NASA Astrophysics Data System (ADS)

    Johnson, Sarah; Edmonds, Terrence

    Micro-electro-mechanical systems or MEMS are used in a variety of today's technology and can be modeled using equations for nonlinear damped harmonic oscillators. Mathematical expressions have been formulated to determine resonance frequency shifts as a result of hardening and softening effects in MEMS devices. In this work we experimentally test the previous theoretical analysis of MEMS resonance frequency shifts in the nonlinear regime. Devices were put under low pressure at room temperature and swept through a range of frequencies with varying AC and DC excitation voltages to detect shifts in the resonant frequency. The MEMS device studied in this work exhibits a dominating spring softening effect due to the device's physical make-up. The softening effect becomes very dominant as the AC excitation is increased and the frequency shift of the resonance peak becomes quite significant at these larger excitations. Hardening effects are heavily dependent on mechanical factors that make up the MEMS devices. But they are not present in these MEMS devices. I will present our results along with the theoretical analysis of the Duffing oscillator model. This work was supported by NSF grant DMR-1461019 (REU) and DMR-1205891 (YL).

  14. Wireless remote weather monitoring system based on MEMS technologies.

    PubMed

    Ma, Rong-Hua; Wang, Yu-Hsiang; Lee, Chia-Yen

    2011-01-01

    This study proposes a wireless remote weather monitoring system based on Micro-Electro-Mechanical Systems (MEMS) and wireless sensor network (WSN) technologies comprising sensors for the measurement of temperature, humidity, pressure, wind speed and direction, integrated on a single chip. The sensing signals are transmitted between the Octopus II-A sensor nodes using WSN technology, following amplification and analog/digital conversion (ADC). Experimental results show that the resistance of the micro temperature sensor increases linearly with input temperature, with an average TCR (temperature coefficient of resistance) value of 8.2 × 10(-4) (°C(-1)). The resistance of the pressure sensor also increases linearly with air pressure, with an average sensitivity value of 3.5 × 10(-2) (Ω/kPa). The sensitivity to humidity increases with ambient temperature due to the effect of temperature on the dielectric constant, which was determined to be 16.9, 21.4, 27.0, and 38.2 (pF/%RH) at 27 °C, 30 °C, 40 °C, and 50 °C, respectively. The velocity of airflow is obtained by summing the variations in resistor response as airflow passed over the sensors providing sensitivity of 4.2 × 10(-2), 9.2 × 10(-2), 9.7 × 10(-2) (Ω/ms(-1)) with power consumption by the heating resistor of 0.2, 0.3, and 0.5 W, respectively. The passage of air across the surface of the flow sensors prompts variations in temperature among each of the sensing resistors. Evaluating these variations in resistance caused by the temperature change enables the measurement of wind direction.

  15. Wireless remote weather monitoring system based on MEMS technologies.

    PubMed

    Ma, Rong-Hua; Wang, Yu-Hsiang; Lee, Chia-Yen

    2011-01-01

    This study proposes a wireless remote weather monitoring system based on Micro-Electro-Mechanical Systems (MEMS) and wireless sensor network (WSN) technologies comprising sensors for the measurement of temperature, humidity, pressure, wind speed and direction, integrated on a single chip. The sensing signals are transmitted between the Octopus II-A sensor nodes using WSN technology, following amplification and analog/digital conversion (ADC). Experimental results show that the resistance of the micro temperature sensor increases linearly with input temperature, with an average TCR (temperature coefficient of resistance) value of 8.2 × 10(-4) (°C(-1)). The resistance of the pressure sensor also increases linearly with air pressure, with an average sensitivity value of 3.5 × 10(-2) (Ω/kPa). The sensitivity to humidity increases with ambient temperature due to the effect of temperature on the dielectric constant, which was determined to be 16.9, 21.4, 27.0, and 38.2 (pF/%RH) at 27 °C, 30 °C, 40 °C, and 50 °C, respectively. The velocity of airflow is obtained by summing the variations in resistor response as airflow passed over the sensors providing sensitivity of 4.2 × 10(-2), 9.2 × 10(-2), 9.7 × 10(-2) (Ω/ms(-1)) with power consumption by the heating resistor of 0.2, 0.3, and 0.5 W, respectively. The passage of air across the surface of the flow sensors prompts variations in temperature among each of the sensing resistors. Evaluating these variations in resistance caused by the temperature change enables the measurement of wind direction. PMID:22163762

  16. MEMS inertial sensors for load monitoring of wind turbine blades

    NASA Astrophysics Data System (ADS)

    Cooperman, Aubryn M.; Martinez, Marcias J.

    2015-03-01

    Structural load monitoring of wind turbines is becoming increasingly important due increasing turbine size and offshore deployment. Rotor blades are key components that can be monitored by continuously measuring their deflection and thereby determining strain and loads on the blades. In this paper, a method is investigated for monitoring blade deformation that utilizes micro-electromechanical systems (MEMS) comprising triaxial accelerometers, magnetometers and gyroscopes. This approach is demonstrated using a cantilever beam instrumented with 5 MEMS and 4 strain gauges. The measured changes in angles obtained from the MEMS are used to determine a deformation surface which is used as an input to a finite element model in order to estimate the strain throughout the beam. The results are then verified by comparison with strain gauge measurements.

  17. BurstMem: A High-Performance Burst Buffer System for Scientific Applications

    SciTech Connect

    Wang, Teng; Oral, H Sarp; Wang, Yandong; Settlemyer, Bradley W; Atchley, Scott; Yu, Weikuan

    2014-01-01

    The growth of computing power on large-scale sys- tems requires commensurate high-bandwidth I/O system. Many parallel file systems are designed to provide fast sustainable I/O in response to applications soaring requirements. To meet this need, a novel system is imperative to temporarily buffer the bursty I/O and gradually flush datasets to long-term parallel file systems. In this paper, we introduce the design of BurstMem, a high- performance burst buffer system. BurstMem provides a storage framework with efficient storage and communication manage- ment strategies. Our experiments demonstrate that BurstMem is able to speed up the I/O performance of scientific applications by up to 8.5 on leadership computer systems.

  18. RF Telemetry System for an Implantable Bio-MEMS Sensor

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.; Hall, David G.; Miranda, Felix A.

    2004-01-01

    In this paper, a novel miniature inductor and a pick-up antenna for contact less powering and RF telemetry from implantable bio-MEMS sensors are presented. The design of the inductor and the pick-up antenna are discussed. In addition, the measured characteristics at the design frequency of 330 MHz have been shown.

  19. Application of the thermoelectric MEMS microwave power sensor in a power radiation monitoring system

    NASA Astrophysics Data System (ADS)

    Bo, Gao; Jing, Yang; Si, Jiang; Debo, Wang

    2016-08-01

    A power radiation monitoring system based on thermoelectric MEMS microwave power sensors is studied. This monitoring system consists of three modules: a data acquisition module, a data processing and display module, and a data sharing module. It can detect the power radiation in the environment and the date information can be processed and shared. The measured results show that the thermoelectric MEMS microwave power sensor and the power radiation monitoring system both have a relatively good linearity. The sensitivity of the thermoelectric MEMS microwave power sensor is about 0.101 mV/mW, and the sensitivity of the monitoring system is about 0.038 V/mW. The voltage gain of the monitoring system is about 380 times, which is relatively consistent with the theoretical value. In addition, the low-frequency and low-power module in the monitoring system is adopted in order to reduce the electromagnetic pollution and the power consumption, and this work will extend the application of the thermoelectric MEMS microwave power sensor in more areas. Project supported by the National Natural Science Foundation of China (No. 11304158), the Province Natural Science Foundation of Jiangsu (No. BK20140890), the Open Research Fund of the Key Laboratory of MEMS of Ministry of Education, Southeast University (No. 3206005302), and the Scientific Research Foundation of Nanjing University of Posts and Telecommunications (Nos. NY213024, NY215139).

  20. U.S. Army Corrosion Office's storage and quality requirements for military MEMS program

    NASA Astrophysics Data System (ADS)

    Zunino, J. L., III; Skelton, D. R.

    2007-04-01

    As the Army transforms into a more lethal, lighter and agile force, the technologies that support these systems must decrease in size while increasing in intelligence. Micro-electromechanical systems (MEMS) are one such technology that the Army and DOD will rely on heavily to accomplish these objectives. Conditions for utilization of MEMS by the military are unique. Operational and storage environments for the military are significantly different than those found in the commercial sector. Issues unique to the military include; high G-forces during gun launch, extreme temperature and humidity ranges, extended periods of inactivity (20 years plus) and interaction with explosives and propellants. The military operational environments in which MEMS will be stored or required to function are extreme and far surpass any commercial operating conditions. Security and encryption are a must for all MEMS communication, tracking, or data reporting devices employed by the military. Current and future military applications of MEMS devices include safety and arming devices, fuzing devices, various guidance systems, sensors/detectors, inertial measurement units, tracking devices, radio frequency devices, wireless Radio Frequency Identifications (RFIDs) and network systems, GPS's, radar systems, mobile base systems and information technology. MEMS embedded into these weapons systems will provide the military with new levels of speed, awareness, lethality, and information dissemination. The system capabilities enhanced by MEMS will translate directly into tactical and strategic military advantages.

  1. Electro-mechanical energy conversion system having a permanent magnet machine with stator, resonant transfer link and energy converter controls

    DOEpatents

    Skeist, S. Merrill; Baker, Richard H.

    2006-01-10

    An electro-mechanical energy conversion system coupled between an energy source and an energy load comprising an energy converter device including a permanent magnet induction machine coupled between the energy source and the energy load to convert the energy from the energy source and to transfer the converted energy to the energy load and an energy transfer multiplexer to control the flow of power or energy through the permanent magnetic induction machine.

  2. Investigation based on nano-electromechanical system double Si3N4 resonant beam pressure sensor.

    PubMed

    Yang, Chuan; Guo, Can; Yuan, Xiaowei

    2011-12-01

    This paper presents a type of NEMS (Nano-Electromechanical System) double Si3N4 resonant beams pressure sensor. The mathematical models are established in allusion to the Si3N4 resonant beams and pressure sensitive diaphragm. The distribution state of stress has been analyzed theoretically based on the mathematical model of pressure sensitive diaphragm; from the analysis result, the position of the Si3N4 resonant beams above the pressure sensitive diaphragm was optimized and then the dominance observed after the double resonant beams are adopted is illustrated. From the analysis result, the position of the Si3N4 resonant beams above the pressure sensitive diaphragm is optimized, illustrating advantages in the adoption of double resonant beams. The capability of the optimized sensor was generally analyzed using the ANSYS software of finite element analysis. The range of measured pressure is 0-400 Kpa, the coefficient of linearity correlation is 0.99346, and the sensitivity of the sensor is 498.24 Hz/Kpa, higher than the traditional sensors. Finally the processing techniques of the sensor chip have been designed with sample being successfully processed.

  3. Totally implantable total artificial heart and ventricular assist device with multipurpose miniature electromechanical energy system.

    PubMed

    Takatani, S; Orime, Y; Tasai, K; Ohara, Y; Naito, K; Mizuguchi, K; Makinouchi, K; Damm, G; Glueck, J; Ling, J

    1994-01-01

    A multipurpose miniature electromechanical energy system has been developed to yield a compact, efficient, durable, and biocompatible total artificial heart (TAH) and ventricular assist device (VAD). Associated controller-driver electronics were recently miniaturized and converted into hybrid circuits. The hybrid controller consists of a microprocessor and controller, motor driver, Hall sensor, and commutation circuit hybrids. The sizing study demonstrated that all these components can be incorporated in the pumping unit of the TAH and VAD, particularly in the centerpiece of the TAH and the motor housing of the VAD. Both TAH and VAD pumping units will start when their power line is connected to either the internal power pack or the external battery unit. As a redundant driving and diagnostic port, an emergency port was newly added and will be placed in subcutaneous location. In case of system failure, the skin will be cut down, and an external motor drive or a pneumatic driver will be connected to this port to run the TAH. This will minimize the circulatory arrest time. Overall efficiency of the TAH without the transcutaneous energy transmission system was 14-18% to deliver pump outputs of 4-9 L/min against the right and left afterload pressures of 25 and 100 mm Hg. The internal power requirement ranged from 6 to 13 W. The rechargeable batteries such as NiCd or NiMH with 1 AH capacity can run the TAH for 30-45 min. The external power requirement, when TETS efficiency of 75% was assumed, ranged from 8 to 18 W. The accelerated endurance test in the 42 degrees C saline bath demonstrated stable performance over 4 months. Long-term endurance and chronic animal studies will continue toward a system with 5 years durability by the year 2000.

  4. An optical fibre MEMS pressure sensor using dual-wavelength interrogation

    NASA Astrophysics Data System (ADS)

    Xiao-qi, Ni; Ming, Wang; Xu-xing, Chen; yi-xian, Ge; Hua, Rong

    2006-09-01

    A novel pressure sensor based on Fabry-Perot interferometry and micro-electromechanical systems (MEMS) technology is proposed and demonstrated. A basic, simplified micro-electromechanical technique is used to fabricate the pressure sensor, and the fabrication process and packaging configuration are outlined in this paper. The interference of multiple cavities as a whole is theoretically analysed and simulated. A dual-wavelength demodulation method, which can compensate the errors independent of optical wavelength, is used to demodulate the sensor by analysing the reflected optical signals. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity and a wide pressure measurement range from 0.1 MPa to 3 MPa.

  5. The effects of electromechanical wrist robot assistive system with neuromuscular electrical stimulation for stroke rehabilitation.

    PubMed

    Hu, X L; Tong, K Y; Li, R; Xue, J J; Ho, S K; Chen, P

    2012-06-01

    An electromyography (EMG)-driven electromechanical robot system integrated with neuromuscular electrical stimulation (NMES) was developed for wrist training after stroke. The performance of the system in assisting wrist flexion/extension tracking was evaluated on five chronic stroke subjects, when the system provided five different schemes with or without NMES and robot assistance. The tracking performances were measured by range of motion (ROM) of the wrist and root mean squared error (RMSE). The performance is better when both NMES and robot assisted in the tracking than those with either NMES or robot only (P<0.05). The muscle co-contractions in the upper limb measured by EMG were reduced when NMES provided assistance (P<0.05). All subjects also attended a 20-session wrist training for evaluating the training effects (3-5 times/week). The results showed improvements on the voluntary motor functions in the hand, wrist and elbow functions after the training, as indicated by the clinical scores of Fugl-Meyer Assessment, Action Research Arm Test, Wolf Motor Function Test; and also showed reduced spasticity in the wrist and the elbow as measured by the Modified Ashworth Score of each subject. After the training, the co-contractions were reduced between the flexor carpi radialis and extensor carpi radialis, and between the biceps brachii and triceps brachii. Assistance from the robot helped improve the movement accuracy; and the NMES helped increase the muscle activation for the wrist joint and suppress the excessive muscular activities from the elbow joint. The NMES-robot assisted wrist training could improve the hand, wrist, and elbow functions.

  6. Backside preparation and failure analysis for packaged microelectromechanical systems (MEMS)

    NASA Astrophysics Data System (ADS)

    Walraven, Jeremy A.; Cole, Edward I., Jr.; Barr, David L.; Anderson, Richard E.; Kilgo, Alice; Maciel, John J.; Morrison, Richard; Karabudak, Nafiz N.

    2004-12-01

    Failure analysis tools and techniques that identify root cause failure mechanisms are key components to improving MEMS technology. Failure analysis and characterization are relatively simple at the wafer and die level where chip access is straightforward. However, analysis and characterization of packaged parts or components encapsulated with covers, caps, etc may be more cumbersome and lead to problems assessing the root cause of failure. This paper will discuss two methods used to prepare the backside of the package/device to allow for failure analysis and inspection of different MEMS components without removing the cap, cover, or lid on the device and/or the package. One method for backside preparation was grinding and polishing the package for IR inspection. This method involved backfilling the package cavity with epoxy to hold the die in place. The other method involved opening a window through the backside of the package, exposing the die for IR inspection. Failure analysis results showed both methods of backside preparation were successful in revealing the failure mechanisms on two different MEMS technologies.

  7. Backside preparation and failure analysis for packaged microelectromechanical systems (MEMS)

    NASA Astrophysics Data System (ADS)

    Walraven, Jeremy A.; Cole, Edward I., Jr.; Barr, David L.; Anderson, Richard E.; Kilgo, Alice; Maciel, John J.; Morrison, Richard; Karabudak, Nafiz N.

    2005-01-01

    Failure analysis tools and techniques that identify root cause failure mechanisms are key components to improving MEMS technology. Failure analysis and characterization are relatively simple at the wafer and die level where chip access is straightforward. However, analysis and characterization of packaged parts or components encapsulated with covers, caps, etc may be more cumbersome and lead to problems assessing the root cause of failure. This paper will discuss two methods used to prepare the backside of the package/device to allow for failure analysis and inspection of different MEMS components without removing the cap, cover, or lid on the device and/or the package. One method for backside preparation was grinding and polishing the package for IR inspection. This method involved backfilling the package cavity with epoxy to hold the die in place. The other method involved opening a window through the backside of the package, exposing the die for IR inspection. Failure analysis results showed both methods of backside preparation were successful in revealing the failure mechanisms on two different MEMS technologies.

  8. Performance interface document for users of Tracking and Data Relay Satellite System (TDRSS) electromechanically steered antenna systems (EMSAS)

    NASA Technical Reports Server (NTRS)

    Hockensmith, R.; Devine, E.; Digiacomo, M.; Hager, F.; Moss, R.

    1983-01-01

    Satellites that use the NASA Tracking and Data Relay Satellite System (TDRSS) require antennas that are crucial for performing and achieving reliable TDRSS link performance at the desired data rate. Technical guidelines are presented to assist the prospective TDRSS medium-and high-data rate user in selecting and procuring a viable, steerable high-gain antenna system. Topics addressed include the antenna gain/transmitter power/data rate relationship; Earth power flux-density limitations; electromechanical requirements dictated by the small beam widths, desired angular coverage, and minimal torque disturbance to the spacecraft; weight and moment considerations; mechanical, electrical and thermal interfaces; design lifetime failure modes; and handling and storage. Proven designs are cited and space-qualified assemblies and components are identified.

  9. Feasibility of Frequency-Modulated Wireless Transmission for a Multi-Purpose MEMS-Based Accelerometer

    PubMed Central

    Sabato, Alessandro; Feng, Maria Q.

    2014-01-01

    Recent advances in the Micro Electro-Mechanical System (MEMS) technology have made wireless MEMS accelerometers an attractive tool for Structural Health Monitoring (SHM) of civil engineering structures. To date, sensors' low sensitivity and accuracy—especially at very low frequencies—have imposed serious limitations for their application in monitoring large-sized structures. Conventionally, the MEMS sensor's analog signals are converted to digital signals before radio-frequency (RF) wireless transmission. The conversion can cause a low sensitivity to the important low-frequency and low-amplitude signals. To overcome this difficulty, the authors have developed a MEMS accelerometer system, which converts the sensor output voltage to a frequency-modulated signal before RF transmission. This is achieved by using a Voltage to Frequency Conversion (V/F) instead of the conventional Analog to Digital Conversion (ADC). In this paper, a prototype MEMS accelerometer system is presented, which consists of a transmitter and receiver circuit boards. The former is equipped with a MEMS accelerometer, a V/F converter and a wireless RF transmitter, while the latter contains an RF receiver and a F/V converter for demodulating the signal. The efficacy of the MEMS accelerometer system in measuring low-frequency and low-amplitude dynamic responses is demonstrated through extensive laboratory tests and experiments on a flow-loop pipeline. PMID:25198003

  10. Feasibility of frequency-modulated wireless transmission for a multi-purpose MEMS-based accelerometer.

    PubMed

    Sabato, Alessandro; Feng, Maria Q

    2014-09-05

    Recent advances in the Micro Electro-Mechanical System (MEMS) technology have made wireless MEMS accelerometers an attractive tool for Structural Health Monitoring (SHM) of civil engineering structures. To date, sensors' low sensitivity and accuracy--especially at very low frequencies--have imposed serious limitations for their application in monitoring large-sized structures. Conventionally, the MEMS sensor's analog signals are converted to digital signals before radio-frequency (RF) wireless transmission. The conversion can cause a low sensitivity to the important low-frequency and low-amplitude signals. To overcome this difficulty, the authors have developed a MEMS accelerometer system, which converts the sensor output voltage to a frequency-modulated signal before RF transmission. This is achieved by using a Voltage to Frequency Conversion (V/F) instead of the conventional Analog to Digital Conversion (ADC). In this paper, a prototype MEMS accelerometer system is presented, which consists of a transmitter and receiver circuit boards. The former is equipped with a MEMS accelerometer, a V/F converter and a wireless RF transmitter, while the latter contains an RF receiver and a F/V converter for demodulating the signal. The efficacy of the MEMS accelerometer system in measuring low-frequency and low-amplitude dynamic responses is demonstrated through extensive laboratory tests and experiments on a flow-loop pipeline.

  11. Guide to the Marine Education Materials System (MEMS). Educational Series No. 22.

    ERIC Educational Resources Information Center

    Gammisch, Susan C.; Lanier, James A.

    This guidebook has been prepared to orient persons wishing to use the Marine Education Materials System (MEMS), a project supported by the Office of Sea Grant, National Oceanic and Atmospheric Administration (NOAA), Department of Commerce. Entries to the system were compiled by the education staff of the Virginia Institute of Marine Science.…

  12. Miniaturization of components and systems for space using MEMS-technology

    NASA Astrophysics Data System (ADS)

    Grönland, Tor-Arne; Rangsten, Pelle; Nese, Martin; Lang, Martin

    2007-06-01

    Development of MEMS-based (micro electro mechanical system) components and subsystems for space applications has been pursued by various research groups and organizations around the world for at least two decades. The main driver for developing MEMS-based components for space is the miniaturization that can be achieved. Miniaturization can not only save orders of magnitude in mass and volume of individual components, but it can also allow increased redundancy, and enable novel spacecraft designs and mission scenarios. However, the commercial breakthrough of MEMS has not occurred within the space business as it has within other branches such as the IT/telecom or automotive industries, or as it has in biotech or life science applications. A main explanation to this is the highly conservative attitude to new technology within the space community. This conservatism is in many senses motivated by a very low risk acceptance in the few and costly space projects that actually ends with a space flight. To overcome this threshold there is a strong need for flight opportunities where reasonable risks can be accepted. Currently there are a few flight opportunities allowing extensive use of new technology in space, but one of the exceptions is the PRISMA program. PRISMA is an international (Sweden, Germany, France, Denmark, Norway, Greece) technology demonstration program with focus on rendezvous and formation flying. It is a two satellite LEO mission with a launch scheduled for the first half of 2009. On PRISMA, a number of novel technologies e.g. RF metrology sensor for Darwin, autonomous formation flying based on GPS and vision-based sensors, ADN-based "green propulsion" will be demonstrated in space for the first time. One of the satellites will also have a miniaturized propulsion system onboard based on MEMS-technology. This novel propulsion system includes two microthruster modules, each including four thrusters with micro- to milli-Newton thrust capability. The novelty

  13. Assessment and Assurance of Microelectronics Packaging Technology of Microelectromechanical Systems (MEMS)

    NASA Technical Reports Server (NTRS)

    Ramesham, Rajeshuni

    2000-01-01

    Microelectromechanical systems (MEMS) have shown a significant promise in the last decade for a variety of applications such as air-bag, pressure sensors, accelerometer, microgyro, etc. Standard semiconductor microelectronics packaging needs the integrated circuits to be protected from the harsh environment, and provide electrical communication with the other parts of the circuit, facilitate thermal dissipation efficiently, and impart mechanical strength to the silicon die. Microelectronics packaging involves wafer dicing, bonding, lead attachment, encapsulation to protect from the environment, electrical integrity, and package leak tests to assure the packaging technology. In the case of MEMS the microstructures (active elements) often interfaces with the hostile environment where packaging leak tests and testing of such devices using chemical and mechanical parameters will be very difficult and expensive. Packaging of MEMS is significantly complex as they serve to protect from the environment and microstructures interact with the same environment to measure or affect the desired physical or chemical parameters. The most of the silicon circuitry is sensitive to temperature, moisture, magnetic field, light, and electromagnetic interference. The package must then protect the on-board silicon circuitry while simultaneously exposing the microsensor to the effect it 'measures to assure the MEMS technology by lowering the risk to zero. MEMS technology has a major application in developing a microspacecraft for space systems provided assurance of MEMS technology is sufficiently addressed nondestructively. This technology would eventually miniaturize many of the components of the spacecraft to reach the NASA's safety and mission assurance goal by building faster, cheaper, better, smaller spacecraft to explore the space more effectively by teaming-up with the other NASA centers using the limited resources available. This paper discusses the latest developments in the MEMS

  14. Microelectromechanical System (MEMS) Device Being Developed for Active Cooling and Temperature Control

    NASA Technical Reports Server (NTRS)

    Beach, Duane E.

    2003-01-01

    High-capacity cooling options remain limited for many small-scale applications such as microelectronic components, miniature sensors, and microsystems. A microelectromechanical system (MEMS) using a Stirling thermodynamic cycle to provide cooling or heating directly to a thermally loaded surface is being developed at the NASA Glenn Research Center to meet this need. The device can be used strictly in the cooling mode or can be switched between cooling and heating modes in milliseconds for precise temperature control. Fabrication and assembly employ techniques routinely used in the semiconductor processing industry. Benefits of the MEMS cooler include scalability to fractions of a millimeter, modularity for increased capacity and staging to low temperatures, simple interfaces, limited failure modes, and minimal induced vibration. The MEMS cooler has potential applications across a broad range of industries such as the biomedical, computer, automotive, and aerospace industries. The basic capabilities it provides can be categorized into four key areas: 1) Extended environmental temperature range in harsh environments; 2) Lower operating temperatures for electronics and other components; 3) Precision spatial and temporal thermal control for temperature-sensitive devices; and 4) The enabling of microsystem devices that require active cooling and/or temperature control. The rapidly expanding capabilities of semiconductor processing in general, and microsystems packaging in particular, present a new opportunity to extend Stirling-cycle cooling to the MEMS domain. The comparatively high capacity and efficiency possible with a MEMS Stirling cooler provides a level of active cooling that is impossible at the microscale with current state-of-the-art techniques. The MEMS cooler technology builds on decades of research at Glenn on Stirling-cycle machines, and capitalizes on Glenn s emerging microsystems capabilities.

  15. Robust and versatile software system for optimal design of MEMS structures

    NASA Astrophysics Data System (ADS)

    Kwak, Byung M.; Lee, Sang H.; Huh, Jae S.

    2000-04-01

    A CAD-integrated total design system for MEMS is developed which can perform analysis and design for mechanical performance of a MEMS structure. The software works in a parametric CAD platform and makes users to do from CAD modeling and analysis to design optimization. Basic philosophy is to assure robustness, versatility and user friendliness. To satisfy these requirements; 1) Design variables are selectable directly form CAD model, 2) Commercial codes are utilized as many as available, and 3) Design sensitivity analysis must be simple and robust. Commercial finite element codes and some newly developed modules are integrated in the system for analysis. For design sensitivity analysis, two approaches were implemented: finite difference method and the Taguchi method. The approximate methods adopted seem to be simple and robust, which can be applied to design of complex practical structures. The design sensitivity analysis by finite difference method, with nonlinear programming and trade-off study, gives satisfactory results. The Taguchi method module is integrated for robust optimal design of MEMS structure. Although it is not meant to find the exact optimum point, it is applicable to practical problems where performance characteristics are hard to evaluate, since this does not require any derivative information. Two examples are taken to examine performance of the developed design tool and proposed methodology. It relieves much of the difficulties often met in conventional design works and has shown practicability for structural design of MEMS.

  16. Multi-Axis Independent Electromechanical Load Control for Docking System Actuation Development and Verification Using dSPACE

    NASA Technical Reports Server (NTRS)

    Oesch, Christopher; Dick, Brandon; Rupp, Timothy

    2015-01-01

    The development of highly complex and advanced actuation systems to meet customer demands has accelerated as the use of real-time testing technology expands into multiple markets at Moog. Systems developed for the autonomous docking of human rated spacecraft to the International Space Station (ISS), envelope multi-operational characteristics which place unique constraints on an actuation system. Real-time testing hardware has been used as a platform for incremental testing and development for the linear actuation system which controls initial capture and docking for vehicles visiting the ISS. This presentation will outline the role of dSPACE hardware as a platform for rapid control-algorithm prototyping as well as an Electromechanical Actuator (EMA) system dynamic loading simulator, both conducted at Moog to develop the safety critical Linear Actuator System (LAS) of the NASA Docking System (NDS).

  17. MEMS/NEMS Devices and Applications

    NASA Astrophysics Data System (ADS)

    Young, Darrin J.; Zorman, Christian A.; Mehregany, Mehran

    Microelectromechanical Systems (MEMS) have played key roles in many important areas, for example transportation, communication, automated manufacturing, environmental monitoring, health care, defense systems, and a wide range of consumer products. MEMS are inherently small, thus offering attractive characteristics such as reduced size, weight, and power dissipation and improved speed and precision compared to their macroscopic counterparts. Integrated circuits (IC) fabrication technology has been the primary enabling technology for MEMS besides a few special etching, bonding and assembly techniques. Microfabrication provides a powerful tool for batch processing and miniaturization of electromechanical devices and systems into a dimensional scale, which is not achievable by conventional machining techniques. As IC fabrication technology continues to scale toward deep sub-micron and nano-meter feature sizes, a variety of nanoelectromechanical systems (NEMS) can be envisioned in the foreseeable future. Nano-scale mechanical devices and systems integrated with nanoelectronics will open a vast number of new exploratory research areas in science and engineering. NEMS will most likely serve as an enabling technology merging engineering with the life sciences in ways that are not currently feasible with the micro-scale tools and technologies. MEMS has been applied to a wide range of fields. Over hundreds of micro-devices have been developed for specific applications. It is thus difficult to provide an overview covering every aspect of the topic. In this chapter, key aspects of MEMS technology and application impacts are illustrated through selecting a few demonstrative device examples, which consist of pressure sensors, inertial sensors, optical and wireless communication devices. Microstructure examples with dimensions on the order of sub-micron are presented with fabrication technologies for future NEMS applications. Although MEMS has experienced significant growth over

  18. It's all in the timing: modeling isovolumic contraction through development and disease with a dynamic dual electromechanical bioreactor system.

    PubMed

    Morgan, Kathy Ye; Black, Lauren Deems

    2014-01-01

    This commentary discusses the rationale behind our recently reported work entitled "Mimicking isovolumic contraction with combined electromechanical stimulation improves the development of engineered cardiac constructs," introduces new data supporting our hypothesis, and discusses future applications of our bioreactor system. The ability to stimulate engineered cardiac tissue in a bioreactor system that combines both electrical and mechanical stimulation offers a unique opportunity to simulate the appropriate dynamics between stretch and contraction and model isovolumic contraction in vitro. Our previous study demonstrated that combined electromechanical stimulation that simulated the timing of isovolumic contraction in healthy tissue improved force generation via increased contractile and calcium handling protein expression and improved hypertrophic pathway activation. In new data presented here, we further demonstrate that modification of the timing between electrical and mechanical stimulation to mimic a non-physiological process negatively impacts the functionality of the engineered constructs. We close by exploring the various disease states that have altered timing between the electrical and mechanical stimulation signals as potential future directions for the use of this system.

  19. Angle extended linear MEMS scanning system for 3D laser vision sensor

    NASA Astrophysics Data System (ADS)

    Pang, Yajun; Zhang, Yinxin; Yang, Huaidong; Zhu, Pan; Gai, Ye; Zhao, Jian; Huang, Zhanhua

    2016-09-01

    Scanning system is often considered as the most important part for 3D laser vision sensor. In this paper, we propose a method for the optical system design of angle extended linear MEMS scanning system, which has features of huge scanning degree, small beam divergence angle and small spot size for 3D laser vision sensor. The principle of design and theoretical formulas are derived strictly. With the help of software ZEMAX, a linear scanning optical system based on MEMS has been designed. Results show that the designed system can extend scanning angle from ±8° to ±26.5° with a divergence angle small than 3.5 mr, and the spot size is reduced for 4.545 times.

  20. Micro-electro-mechanical-system (MEMS)-based fiber optic grating sensor for improving weapon stabilization and fire control

    NASA Astrophysics Data System (ADS)

    Zhang, Sean Z.; Xu, Guoda; Qui, Wei; Lin, Freddie S.; Testa, Robert C.; Mattice, Michael S.

    2000-06-01

    A MEMS-based fiber optic grating sensor (FOGS) for improving weapon stabilization and fire control has been investigated and developed. The technique overwrites two fiber Bragg gratings (FBGs) onto a polarization-preserving optical fiber core. A MEMS diaphragm is fabricated and integrated with the overlaid FBGs to enhance the performance and reliability of the sensor. A simulation model for the MEMS-FOGS was derived, and simulation results concerning load, angle, strain, and temperature were obtained. The fabricated MEMS diaphragm and the overlaid FBGs are packaged together and mounted on a specially designed cantilever beam system. User-friendly software for sensing system design and data analysis has been developed and can be used to control other sensing systems. The combined multifunctional sensitive. The fully developed sensing system is expected to find applications in fire control, weapon stabilization, and other areas where accurately sensing strain and temperature is critical.

  1. Application of MEMS Accelerometers and Gyroscopes in Fast Steering Mirror Control Systems.

    PubMed

    Tian, Jing; Yang, Wenshu; Peng, Zhenming; Tang, Tao; Li, Zhijun

    2016-01-01

    In a charge-coupled device (CCD)-based fast steering mirror (FSM) tracking control system, high control bandwidth is the most effective way to enhance the closed-loop performance. However, the control system usually suffers a great deal from mechanical resonances and time delays induced by the low sampling rate of CCDs. To meet the requirements of high precision and load restriction, fiber-optic gyroscopes (FOGs) are usually used in traditional FSM tracking control systems. In recent years, the MEMS accelerometer and gyroscope are becoming smaller and lighter and their performance have improved gradually, so that they can be used in a fast steering mirror (FSM) to realize the stabilization of the line-of-sight (LOS) of the control system. Therefore, a tentative approach to implement a CCD-based FSM tracking control system, which uses MEMS accelerometers and gyroscopes as feedback components and contains an acceleration loop, a velocity loop and a position loop, is proposed. The disturbance suppression of the proposed method is the product of the error attenuation of the acceleration loop, the velocity loop and the position loop. Extensive experimental results show that the MEMS accelerometers and gyroscopes can act the similar role as the FOG with lower cost for stabilizing the LOS of the FSM tracking control system. PMID:27023557

  2. Application of MEMS Accelerometers and Gyroscopes in Fast Steering Mirror Control Systems.

    PubMed

    Tian, Jing; Yang, Wenshu; Peng, Zhenming; Tang, Tao; Li, Zhijun

    2016-01-01

    In a charge-coupled device (CCD)-based fast steering mirror (FSM) tracking control system, high control bandwidth is the most effective way to enhance the closed-loop performance. However, the control system usually suffers a great deal from mechanical resonances and time delays induced by the low sampling rate of CCDs. To meet the requirements of high precision and load restriction, fiber-optic gyroscopes (FOGs) are usually used in traditional FSM tracking control systems. In recent years, the MEMS accelerometer and gyroscope are becoming smaller and lighter and their performance have improved gradually, so that they can be used in a fast steering mirror (FSM) to realize the stabilization of the line-of-sight (LOS) of the control system. Therefore, a tentative approach to implement a CCD-based FSM tracking control system, which uses MEMS accelerometers and gyroscopes as feedback components and contains an acceleration loop, a velocity loop and a position loop, is proposed. The disturbance suppression of the proposed method is the product of the error attenuation of the acceleration loop, the velocity loop and the position loop. Extensive experimental results show that the MEMS accelerometers and gyroscopes can act the similar role as the FOG with lower cost for stabilizing the LOS of the FSM tracking control system.

  3. Application of MEMS Accelerometers and Gyroscopes in Fast Steering Mirror Control Systems

    PubMed Central

    Tian, Jing; Yang, Wenshu; Peng, Zhenming; Tang, Tao; Li, Zhijun

    2016-01-01

    In a charge-coupled device (CCD)-based fast steering mirror (FSM) tracking control system, high control bandwidth is the most effective way to enhance the closed-loop performance. However, the control system usually suffers a great deal from mechanical resonances and time delays induced by the low sampling rate of CCDs. To meet the requirements of high precision and load restriction, fiber-optic gyroscopes (FOGs) are usually used in traditional FSM tracking control systems. In recent years, the MEMS accelerometer and gyroscope are becoming smaller and lighter and their performance have improved gradually, so that they can be used in a fast steering mirror (FSM) to realize the stabilization of the line-of-sight (LOS) of the control system. Therefore, a tentative approach to implement a CCD-based FSM tracking control system, which uses MEMS accelerometers and gyroscopes as feedback components and contains an acceleration loop, a velocity loop and a position loop, is proposed. The disturbance suppression of the proposed method is the product of the error attenuation of the acceleration loop, the velocity loop and the position loop. Extensive experimental results show that the MEMS accelerometers and gyroscopes can act the similar role as the FOG with lower cost for stabilizing the LOS of the FSM tracking control system. PMID:27023557

  4. A Comparison Simulation of Fixed-fixed Type MEMS Switches

    NASA Astrophysics Data System (ADS)

    Rezazadeh, G.; Sadeghian, H.; Malekpour, E.

    2006-04-01

    In the present work pull-in voltage of fixed-fixed end type MEMS switches with variative electrostatic area has been calculated using a distributed model and applying a full nonlinear finite difference discretizing method. The governing nonlinear differential equation has been derived using of the variational principle for multi domain electromechanical coupled system. The numerical results of the beam with variative electrostatic area with the results of Coupled-Domain Finite Element method have been compared and very good agreement has been achieved.

  5. Acceleration of dormant storage effects to address the reliability of silicon surface micromachined Micro-Electro-Mechanical Systems (MEMS).

    SciTech Connect

    Cox, James V.; Candelaria, Sam A.; Dugger, Michael Thomas; Duesterhaus, Michelle Ann; Tanner, Danelle Mary; Timpe, Shannon J.; Ohlhausen, James Anthony; Skousen, Troy J.; Jenkins, Mark W.; Jokiel, Bernhard, Jr.; Walraven, Jeremy Allen; Parson, Ted Blair

    2006-06-01

    Qualification of microsystems for weapon applications is critically dependent on our ability to build confidence in their performance, by predicting the evolution of their behavior over time in the stockpile. The objective of this work was to accelerate aging mechanisms operative in surface micromachined silicon microelectromechanical systems (MEMS) with contacting surfaces that are stored for many years prior to use, to determine the effects of aging on reliability, and relate those effects to changes in the behavior of interfaces. Hence the main focus was on 'dormant' storage effects on the reliability of devices having mechanical contacts, the first time they must move. A large number ({approx}1000) of modules containing prototype devices and diagnostic structures were packaged using the best available processes for simple electromechanical devices. The packaging processes evolved during the project to better protect surfaces from exposure to contaminants and water vapor. Packages were subjected to accelerated aging and stress tests to explore dormancy and operational environment effects on reliability and performance. Functional tests and quantitative measurements of adhesion and friction demonstrated that the main failure mechanism during dormant storage is change in adhesion and friction, precipitated by loss of the fluorinated monolayer applied after fabrication. The data indicate that damage to the monolayer can occur at water vapor concentrations as low as 500 ppm inside the package. The most common type of failure was attributed to surfaces that were in direct contact during aging. The application of quantitative methods for monolayer lubricant analysis showed that even though the coverage of vapor-deposited monolayers is generally very uniform, even on hidden surfaces, locations of intimate contact can be significantly depleted in initial concentration of lubricating molecules. These areas represent defects in the film prone to adsorption of water or

  6. Dynamics simulation of MEMS device embedded-hard-disk-drive system

    NASA Astrophysics Data System (ADS)

    Yang, Jiaping; Chai, Jie; Lim, Boon Baun; Chen, Shixin

    2002-04-01

    Currently, hard disk drives (HHD) use rotating disks to store digital data and magnetic recording heads are flying on the disk to read/write data. The recording heads are mounted on a slider- suspension assembly, which makes heads move from one track to another on the disk. The heads movement is controlled by close-loop feedback servo system. It is well known that dynamic behaviors of head-slider-suspension-assembly (HSA) system are of great influence on the track per inch capacity of HDD1,2. As the problem is structurally complex, it is usually investigated using experimental methods or finite element simulation models 3. Furthermore, the dual-stage servo system, that is, a conventional VCM as the primary stage and a MEMS actuator as the secondary stage for MEMS device embedded HAS, has resulted in more difficulties in predicting HDD dynamic performance. This paper presents studies of the problem using macromodeling simulation approach. It applies efficient FEM based sub-structuring synthesis (SSS)4 and fast boundary element method (BEM) approaches incorporated with system dynamics technology to investigate dynamic characteristics of MEMS actuator embedded HAS system for HDD.

  7. The application of multilayer elastic beam in MEMS safe and arming system

    SciTech Connect

    Li, Guozhong Shi, Gengchen; Sui, Li; Yi, Futing; Wang, Bo

    2015-07-15

    In this paper, a new approach for a multilayer elastic beam to provide a driving force and driving distance for a MEMS safe and arming system is presented. In particular this is applied where a monolayer elastic beam cannot provide adequate driving force and driving distance at the same time in limited space. Compared with thicker elastic beams, the bilayer elastic beam can provide twice the driving force of a monolayer beam to guarantee the MEMS safe and arming systems work reliably without decreasing the driving distance. In this paper, the theoretical analysis, numerical simulation and experimental verification of the multilayer elastic beam is presented. The numerical simulation and experimental results show that the bilayer elastic provides 1.8–2 times the driving force of a monolayer, and a method that improves driving force without reducing the driving distance.

  8. Electromechanical Componentry. High-Technology Training Module.

    ERIC Educational Resources Information Center

    Lindemann, Don

    This training module on electromechanical components contains 10 units for a two-year vocational program packaging system equipment control course at Wisconsin Indianhead Technical College. This module describes the functions of electromechanical devices essential for understanding input/output devices for Programmable Logic Control (PLC)…

  9. Monitoring the performance of geosynthetic materials within pavement systems using MEMS

    NASA Astrophysics Data System (ADS)

    Attoh-Okine, Nii O.; Ayenu-Prah, Albert Y.; Mensah, Stephen A.

    2005-05-01

    Geosynthetic materials have found useful applications when unbound aggregates have been placed on cohesive soil with very weak subgrade. They have also been successfully used in retarding reflective cracking in both flexible and composite pavements. There are many applications of geosynthetics in pavement engineering yet there is considerable lack of understanding in the behavior of the material. Geosynthetic materials exhibit very peculiar properties in the area of tensile strength and reinforcement. MEMS are miniature sensing or actuating devices that can interact with other environments (provided no adverse reaction occurs) to either obtain information or alter it. With remote query capability, it appears such devices can be embedded in pavement systems as testing and monitoring tools. The aim of this paper is to propose both field and laboratory methods for monitoring geotextile performance using MEMS.

  10. MEMS-Based Satellite Micropropulsion Via Catalyzed Hydrogen Peroxide Decomposition

    NASA Technical Reports Server (NTRS)

    Hitt, Darren L.; Zakrzwski, Charles M.; Thomas, Michael A.; Bauer, Frank H. (Technical Monitor)

    2001-01-01

    Micro-electromechanical systems (MEMS) techniques offer great potential in satisfying the mission requirements for the next generation of "micro-scale" satellites being designed by NASA and Department of Defense agencies. More commonly referred to as "nanosats", these miniature satellites feature masses in the range of 10-100 kg and therefore have unique propulsion requirements. The propulsion systems must be capable of providing extremely low levels of thrust and impulse while also satisfying stringent demands on size, mass, power consumption and cost. We begin with an overview of micropropulsion requirements and some current MEMS-based strategies being developed to meet these needs. The remainder of the article focuses the progress being made at NASA Goddard Space Flight Center towards the development of a prototype monopropellant MEMS thruster which uses the catalyzed chemical decomposition of high concentration hydrogen peroxide as a propulsion mechanism. The products of decomposition are delivered to a micro-scale converging/diverging supersonic nozzle which produces the thrust vector; the targeted thrust level approximately 500 N with a specific impulse of 140-180 seconds. Macro-scale hydrogen peroxide thrusters have been used for satellite propulsion for decades; however, the implementation of traditional thruster designs on a MEMS scale has uncovered new challenges in fabrication, materials compatibility, and combustion and hydrodynamic modeling. A summary of the achievements of the project to date is given, as is a discussion of remaining challenges and future prospects.

  11. Variable Emissivity Through MEMS Technology

    NASA Technical Reports Server (NTRS)

    Darrin, Ann Garrison; Osiander, Robert; Champion, John; Swanson, Ted; Douglas, Donya; Grob, Lisa M.; Powers, Edward I. (Technical Monitor)

    2000-01-01

    This paper discusses a new technology for variable emissivity (vari-e) radiator surfaces, which has significant advantages over traditional radiators and promises an alternative design technique for future spacecraft thermal control systems. All spacecraft rely on radiative surfaces to dissipate waste heat. These radiators have special coatings, typically with a low solar absorptivity and a high infrared-red emissivity, that are intended to optimize performance under the expected heat load and thermal sink environment. The dynamics of the heat loads and thermal environment make it a challenge to properly size the radiator and often require some means of regulating the heat rejection rate of the radiators in order to achieve proper thermal balance. Specialized thermal control coatings, which can passively or actively adjust their emissivity offer an attractive solution to these design challenges. Such systems would allow intelligent control of the rate of heat loss from a radiator in response to heat load and thermal environmental variations. Intelligent thermal control through variable emissivity systems is well suited for nano and pico spacecraft applications where large thermal fluctuations are expected due to the small thermal mass and limited electric resources. Presently there are three different types of vari-e technologies under development: Micro ElectroMechanical Systems (MEMS) louvers, Electrochromic devices, and Electrophoretic devices. This paper will describe several prototypes of micromachined (MEMS) louvers and experimental results for the emissivity variations measured on theses prototypes. It will further discuss possible actuation mechanisms and space reliability aspects for different designs. Finally, for comparison parametric evaluations of the thermal performances of the new vari-e technology and standard thermal control systems are presented in this paper.

  12. A Micro Electrical Mechanical Systems (MEMS)-based Cryogenic Deformable Mirror

    NASA Astrophysics Data System (ADS)

    Enya, K.; Kataza, H.; Bierden, P.

    2009-03-01

    We present our first results on the development and evaluation of a cryogenic deformable mirror (DM) based on Micro Electro Mechanical Systems (MEMS) technology. A MEMS silicon-based DM chip with 32 channels, in which each channel is 300 μm × 300 μm in size, was mounted on a silicon substrate in order to minimize distortion and prevent it from being permanently damaged by thermal stresses introduced by cooling. The silicon substrate was oxidized to obtain electric insulation and had a metal fan-out pattern on the surface. For cryogenic tests, we constructed a measurement system consisting of a Fizeau interferometer, a cryostat cooled by liquid N2, zooming optics, electric drivers. The surface of the mirror at 95 K deformed in response to the application of a voltage, and no significant difference was found between the deformation at 95 K and that at room temperature. The power dissipation by the cryogenic DM was also measured, and we suggest that this is small enough for it to be used in a space cryogenic telescope. The properties of the DM remained unchanged after five cycles of vacuum pumping, cooling, warming, and venting. We conclude that fabricating cryogenic DMs employing MEMS technology is a promising approach. Therefore, we intend to develop a more sophisticated device for actual use, and to look for potential applications including the Space Infrared Telescope for Cosmology & Astrophysics (SPICA), and other missions.

  13. Commercial-Off-The-Shelf Microelectromechanical Systems (MEMS) Flow-Measurement Probes Fabricated And Assembled

    NASA Technical Reports Server (NTRS)

    Redding, Chip

    2002-01-01

    As an alternative to conventional tubing instrumentation for measuring airflow, designers and technicians at the NASA Glenn Research Center have been fabricating packaging components and assembling a set of unique probes using commercial-off-the-shelf microelectromechanical systems (MEMS) integrated circuits (computer chips). Using MEMS as an alternative has some compelling advantages over standard measurement devices. Sensor technologies have matured through high-production usage in industries such as automotive and aircraft manufacturers. Currently, MEMS are the choice in applications such as tire pressure monitors, altimeters, pneumatic controls, cable leak detectors, and consumer appliances. Conventional instrumentation uses tubing buried in the model aerodynamic surfaces or wind tunnel walls. The measurements are made when pressure is introduced at the tube opening. The pressure then must travel the tubing for lengths ranging from 20 to hundreds of feet before reaching an electronic signal conditioner. This condition causes a considerable amount of damping and requires measurements to be made only after the test rig has reached steady-state operation. The electronic MEMS pressure sensor is able to take readings continuously under dynamic states in nearly real time. The use of stainless steel tubing for pressure measurements requires many tubes to be cleaned, cut to length, carefully installed, and delicately deburred and spliced for use. A cluster of a few hundred 1/16-in.- (0.0625-in.-) diameter tubes (not uncommon in research testing facilities) can be several inches in diameter and may weigh enough to require two men to handle. Replacing hard tubing with electronic chips can eliminate much of the bulk. Each sensor would fit on the tip of the 1/16-in. tubing with room to spare. The P592 piezoresistive silicon pressure sensor (Lucas NovaSensor, Fremont, CA) was chosen for this project because of its cost, availability, and tolerance to extreme ambient

  14. Simulation of MEMS for the Next Generation Space Telescope

    NASA Technical Reports Server (NTRS)

    Mott, Brent; Kuhn, Jonathan; Broduer, Steve (Technical Monitor)

    2001-01-01

    The NASA Goddard Space Flight Center (GSFC) is developing optical micro-electromechanical system (MEMS) components for potential application in Next Generation Space Telescope (NGST) science instruments. In this work, we present an overview of the electro-mechanical simulation of three MEMS components for NGST, which include a reflective micro-mirror array and transmissive microshutter array for aperture control for a near infrared (NIR) multi-object spectrometer and a large aperture MEMS Fabry-Perot tunable filter for a NIR wide field camera. In all cases the device must operate at cryogenic temperatures with low power consumption and low, complementary metal oxide semiconductor (CMOS) compatible, voltages. The goal of our simulation efforts is to adequately predict both the performance and the reliability of the devices during ground handling, launch, and operation to prevent failures late in the development process and during flight. This goal requires detailed modeling and validation of complex electro-thermal-mechanical interactions and very large non-linear deformations, often involving surface contact. Various parameters such as spatial dimensions and device response are often difficult to measure reliably at these small scales. In addition, these devices are fabricated from a wide variety of materials including surface micro-machined aluminum, reactive ion etched (RIE) silicon nitride, and deep reactive ion etched (DRIE) bulk single crystal silicon. The above broad set of conditions combine to be a formidable challenge for space flight qualification analysis. These simulations represent NASA/GSFC's first attempts at implementing a comprehensive strategy to address complex MEMS structures.

  15. Tactile Sensing System Based on Arrays of Graphene Woven Microfabrics: Electromechanical Behavior and Electronic Skin Application.

    PubMed

    Yang, Tingting; Wang, Wen; Zhang, Hongze; Li, Xinming; Shi, Jidong; He, Yijia; Zheng, Quan-shui; Li, Zhihong; Zhu, Hongwei

    2015-11-24

    Nanomaterials serve as promising candidates for strain sensing due to unique electromechanical properties by appropriately assembling and tailoring their configurations. Through the crisscross interlacing of graphene microribbons in an over-and-under fashion, the obtained graphene woven fabric (GWF) indicates a good trade-off between sensitivity and stretchability compared with those in previous studies. In this work, the function of woven fabrics for highly sensitive strain sensing is investigated, although network configuration is always a strategy to retain resistance stability. The experimental and simulation results indicate that the ultrahigh mechanosensitivity with gauge factors of 500 under 2% strain is attributed to the macro-woven-fabric geometrical conformation of graphene, which induces a large interfacial resistance between the interlaced ribbons and the formation of microscale-controllable, locally oriented zigzag cracks near the crossover location, both of which have a synergistic effect on improving sensitivity. Meanwhile, the stretchability of the GWF could be tailored to as high as over 40% strain by adjusting graphene growth parameters and adopting oblique angle direction stretching simultaneously. We also demonstrate that sensors based on GWFs are applicable to human motion detection, sound signal acquisition, and spatially resolved monitoring of external stress distribution. PMID:26468735

  16. Tactile Sensing System Based on Arrays of Graphene Woven Microfabrics: Electromechanical Behavior and Electronic Skin Application.

    PubMed

    Yang, Tingting; Wang, Wen; Zhang, Hongze; Li, Xinming; Shi, Jidong; He, Yijia; Zheng, Quan-shui; Li, Zhihong; Zhu, Hongwei

    2015-11-24

    Nanomaterials serve as promising candidates for strain sensing due to unique electromechanical properties by appropriately assembling and tailoring their configurations. Through the crisscross interlacing of graphene microribbons in an over-and-under fashion, the obtained graphene woven fabric (GWF) indicates a good trade-off between sensitivity and stretchability compared with those in previous studies. In this work, the function of woven fabrics for highly sensitive strain sensing is investigated, although network configuration is always a strategy to retain resistance stability. The experimental and simulation results indicate that the ultrahigh mechanosensitivity with gauge factors of 500 under 2% strain is attributed to the macro-woven-fabric geometrical conformation of graphene, which induces a large interfacial resistance between the interlaced ribbons and the formation of microscale-controllable, locally oriented zigzag cracks near the crossover location, both of which have a synergistic effect on improving sensitivity. Meanwhile, the stretchability of the GWF could be tailored to as high as over 40% strain by adjusting graphene growth parameters and adopting oblique angle direction stretching simultaneously. We also demonstrate that sensors based on GWFs are applicable to human motion detection, sound signal acquisition, and spatially resolved monitoring of external stress distribution.

  17. Infrastructure, Technology and Applications of Micro-Electro-Mechanical Systems (MEMS)

    SciTech Connect

    Allen, J.J.; Jakubczak, J.F.; Krygowski, T.W.; Miller, S.L.; Montague, S.; Rodgers, M.S.; Sniegowski, J.J.

    1999-07-09

    A review is made of the infrastructure, technology and capabilities of Sandia National Laboratories for the development of micromechanical systems. By incorporating advanced fabrication processes, such as chemical mechanical polishing, and several mechanical polysilicon levels, the range of micromechanical systems that can be fabricated in these technologies is virtually limitless. Representative applications include a micro-engine driven mirror, and a micromachined lock. Using a novel integrated MEMS/CMOS technology, a six degree-of-freedom accelerometer/gyroscope system has been designed by researchers at U.C. Berkeley and fabricated on the same silicon chip as the CMOS control circuits to produce an integrated micro-navigational unit.

  18. System-in Package of Integrated Humidity Sensor Using CMOS-MEMS Technology.

    PubMed

    Lee, Sung Pil

    2015-10-01

    Temperature/humidity microchips with micropump were fabricated using a CMOS-MEMS process and combined with ZigBee modules to implement a sensor system in package (SIP) for a ubiquitous sensor network (USN) and/or a wireless communication system. The current of a diode temperature sensor to temperature and a normalized current of FET humidity sensor to relative humidity showed linear characteristics, respectively, and the use of the micropump has enabled a faster response. A wireless reception module using the same protocol as that in transmission systems processed the received data within 10 m and showed temperature and humidity values in the display.

  19. MEMS in Singapore

    NASA Astrophysics Data System (ADS)

    Tay, Francis E.

    2001-03-01

    Microelectromechanical Systems (MEMS) can be termed as a crossroad technology. Cross road in the sense that it is an amalgamation of various disciplines to produce a solution. Cross road also, in the sense that it is disruptive to the way that solutions used to be provided. At the crossroad, a decision needs to be made either to do things the old way or to embrace the new technology. In this paper, a review is made to the research and development of MEMS technology with potentially widespread applications in Singapore. In most cases, these are preparations to a possible acceleration of MEMS related industry in this part of the world. However, the author also noted that the transfer of MEMS technology from the laboratory to the industry is not a trivial matter. A major decision has to be made due to the high capital outlay and the high operational costs involved. Further, many production related issues such as yield and packaging have to be considered. A large number of MEMS commercial outfits such as Bosch are serving internal customers. As a small country with limited resources, Singapore places great emphasis on building up MEMS research and development activities to support future high value-added design and fabrication. In this paper, some of the MEMS activities in the national universities and institutes in Singapore are introduced, and some recent progress and development of MEMS technology in Singapore are presented.

  20. New emerging MEMS applications

    NASA Astrophysics Data System (ADS)

    Mounier, Eric; Eloy, Jean-Christophe

    2007-02-01

    This paper presents the trends for the years to come for the different MEMS markets. Consumer applications have really started to push the MEMS business in 2005. Many different devices are involved, like pressure sensors (altimeters), microphones, accelerometers, gyroscopes . . . One of the most significant consequences is that all the Top 50 semiconductor companies are now looking at these MEMS applications as possible growth areas. Another result of the growth of the MEMS market is the strong growth of the foundries and contract manufacturers. We have seen growth of more than 35% in 2005 compared to 2004 and we expect similar growth in the next 3 years. We will review the next MEMS applications which have currently a high growth: Si microphones, microdisplays (for RPTV, portable projectors or automotive HUDs), gyroscopes and micro-fuel cells. In the longer term, micro-source of energy could also become an important MEMS market. In term of milestones, the following points can be highlighted: -In 2005 market, the MEMS market is 5.1 B worldwide and very fragmented in terms of companies and products. -In 2010, it will be a 9.7 B market worldwide. MEMS foundries and contract manufacturers will account for at least 8 % of the world market with several being public companies. More than 50% of today's systems companies who have integrated fabs will be using external manufacturers. Several large integrated companies will have created independent MEMS spin-offs and IC manufacturers will be deeply involved in MEMS manufacturing. -In 2015, it will be an 18 B$ market worldwide with no longer systems manufacturers with internal fabs. And we forecast that 50% of the total market will be in the hands of semiconductor manufacturers.

  1. Biomedical microelectromechanical systems (BioMEMS): Revolution in drug delivery and analytical techniques.

    PubMed

    Jivani, Rishad R; Lakhtaria, Gaurang J; Patadiya, Dhaval D; Patel, Laxman D; Jivani, Nurrudin P; Jhala, Bhagyesh P

    2016-01-01

    Advancement in microelectromechanical system has facilitated the microfabrication of polymeric substrates and the development of the novel class of controlled drug delivery devices. These vehicles have specifically tailored three dimensional physical and chemical features which together, provide the capacity to target cell, stimulate unidirectional controlled release of therapeutics and augment permeation across the barriers. Apart from drug delivery devices microfabrication technology's offer exciting prospects to generate biomimetic gastrointestinal tract models. BioMEMS are capable of analysing biochemical liquid sample like solution of metabolites, macromolecules, proteins, nucleic acid, cells and viruses. This review summarized multidisciplinary application of biomedical microelectromechanical systems in drug delivery and its potential in analytical procedures. PMID:26903763

  2. Biomedical microelectromechanical systems (BioMEMS): Revolution in drug delivery and analytical techniques

    PubMed Central

    Jivani, Rishad R.; Lakhtaria, Gaurang J.; Patadiya, Dhaval D.; Patel, Laxman D.; Jivani, Nurrudin P.; Jhala, Bhagyesh P.

    2013-01-01

    Advancement in microelectromechanical system has facilitated the microfabrication of polymeric substrates and the development of the novel class of controlled drug delivery devices. These vehicles have specifically tailored three dimensional physical and chemical features which together, provide the capacity to target cell, stimulate unidirectional controlled release of therapeutics and augment permeation across the barriers. Apart from drug delivery devices microfabrication technology’s offer exciting prospects to generate biomimetic gastrointestinal tract models. BioMEMS are capable of analysing biochemical liquid sample like solution of metabolites, macromolecules, proteins, nucleic acid, cells and viruses. This review summarized multidisciplinary application of biomedical microelectromechanical systems in drug delivery and its potential in analytical procedures. PMID:26903763

  3. IR performance study of an adaptive coded aperture "diffractive imaging" system employing MEMS "eyelid shutter" technologies

    NASA Astrophysics Data System (ADS)

    Mahalanobis, A.; Reyner, C.; Patel, H.; Haberfelde, T.; Brady, David; Neifeld, Mark; Kumar, B. V. K. Vijaya; Rogers, Stanley

    2007-09-01

    Adaptive coded aperture sensing is an emerging technology enabling real time, wide-area IR/visible sensing and imaging. Exploiting unique imaging architectures, adaptive coded aperture sensors achieve wide field of view, near-instantaneous optical path repositioning, and high resolution while reducing weight, power consumption and cost of air- and space born sensors. Such sensors may be used for military, civilian, or commercial applications in all optical bands but there is special interest in diffraction imaging sensors for IR applications. Extension of coded apertures from Visible to the MWIR introduces the effects of diffraction and other distortions not observed in shorter wavelength systems. A new approach is being developed under the DARPA/SPO funded LACOSTE (Large Area Coverage Optical search-while Track and Engage) program, that addresses the effects of diffraction while gaining the benefits of coded apertures, thus providing flexibility to vary resolution, possess sufficient light gathering power, and achieve a wide field of view (WFOV). The photonic MEMS-Eyelid "sub-aperture" array technology is currently being instantiated in this DARPA program to be the heart of conducting the flow (heartbeat) of the incoming signal. However, packaging and scalability are critical factors for the MEMS "sub-aperture" technology which will determine system efficacy as well as military and commercial usefulness. As larger arrays with 1,000,000+ sub-apertures are produced for this LACOSTE effort, the available Degrees of Freedom (DOF) will enable better spatial resolution, control and refinement on the coding for the system. Studies (SNR simulations) will be performed (based on the Adaptive Coded Aperture algorithm implementation) to determine the efficacy of this diffractive MEMS approach and to determine the available system budget based on simulated bi-static shutter-element DOF degradation (1%, 5%, 10%, 20%, etc..) trials until the degradation level where it is

  4. System Model for MEMS based Laser Ultrasonic Receiver

    NASA Technical Reports Server (NTRS)

    Wilson, William C.

    2002-01-01

    A need has been identified for more advanced nondestructive Evaluation technologies for assuring the integrity of airframe structures, wiring, etc. Laser ultrasonic inspection instruments have been shown to detect flaws in structures. However, these instruments are generally too bulky to be used in the confined spaces that are typical of aerospace vehicles. Microsystems technology is one key to reducing the size of current instruments and enabling increased inspection coverage in areas that were previously inaccessible due to instrument size and weight. This paper investigates the system modeling of a Micro OptoElectroMechanical System (MOEMS) based laser ultrasonic receiver. The system model is constructed in software using MATLAB s dynamical simulator, Simulink. The optical components are modeled using geometrical matrix methods and include some image processing. The system model includes a test bench which simulates input stimuli and models the behavior of the material under test.

  5. MEMS- and NEMS-based complex adaptive smart devices and systems

    NASA Astrophysics Data System (ADS)

    Varadan, Vijay K.

    2001-10-01

    The microelectronics industry has seen explosive growth during the last thirty years. Extremely large markets for logic and memory devices have driven the development of new materials, and technologies for the fabrication of even more complex devices with feature sizes now down at the sub micron and nanometer level. Recent interest has arisen in employing these materials, tools and technologies for the fabrication of miniature sensors and actuators and their integration with electronic circuits to produce smart devices and systems. This effort offers the promise of: 1) increasing the performance and manufacturability of both sensors and actuators by exploiting new batch fabrication processes developed including micro stereo lithographic and micro molding techniques; 2) developing novel classes of materials and mechanical structures not possible previously, such as diamond like carbon, silicon carbide and carbon nanotubes, micro-turbines and micro-engines; 3) development of technologies for the system level and wafer level integration of micro components at the nanometer precision, such as self-assembly techniques and robotic manipulation; 4) development of control and communication systems for MEMS devices, such as optical and RF wireless, and power delivery systems, etc. A novel composite structure can be tailored by functionalizing carbon nanotubes and chemically bonding them with the polymer matrix e.g. block or graft copolymer, or even cross-linked copolymer, to impart exceptional structural, electronic and surface properties. Bio- and mechanical-MEMS devices derived from this hybrid composite provide a new avenue for future smart systems.

  6. Development of strapdown inertial navigation system with MEMS sensors, barometric altimeter and ultrasonic range meter

    NASA Astrophysics Data System (ADS)

    Kholopov, I. S.

    2015-10-01

    The results of strapdown inertial navigation system (SINS) tests with 9 degrees of freedom MEMS sensor MPU-9150 (triaxial accelerometer, gyroscope and magnetometer), pressure sensor LPS331 and ultrasonic range meter HC-SR04, implemented on the FPGA Altera Cyclone-II evaluation board DE1 is considered. SINS measures the spatial coordinates and altitude relative to the starting point, the orientation angles and distances to obstacles along the way. It is shown that the relative error of the spatial coordinates estimation does not exceed 1.1% in interval of some minutes.

  7. MEMS-based system and image processing strategy for epiretinal prosthesis.

    PubMed

    Xia, Peng; Hu, Jie; Qi, Jin; Gu, Chaochen; Peng, Yinghong

    2015-01-01

    Retinal prostheses have the potential to restore some level of visual function to the patients suffering from retinal degeneration. In this paper, an epiretinal approach with active stimulation devices is presented. The MEMS-based processing system consists of an external micro-camera, an information processor, an implanted electrical stimulator and a microelectrode array. The image processing strategy combining image clustering and enhancement techniques was proposed and evaluated by psychophysical experiments. The results indicated that the image processing strategy improved the visual performance compared with direct merging pixels to low resolution. The image processing methods assist epiretinal prosthesis for vision restoration.

  8. MEMS-based system and image processing strategy for epiretinal prosthesis.

    PubMed

    Xia, Peng; Hu, Jie; Qi, Jin; Gu, Chaochen; Peng, Yinghong

    2015-01-01

    Retinal prostheses have the potential to restore some level of visual function to the patients suffering from retinal degeneration. In this paper, an epiretinal approach with active stimulation devices is presented. The MEMS-based processing system consists of an external micro-camera, an information processor, an implanted electrical stimulator and a microelectrode array. The image processing strategy combining image clustering and enhancement techniques was proposed and evaluated by psychophysical experiments. The results indicated that the image processing strategy improved the visual performance compared with direct merging pixels to low resolution. The image processing methods assist epiretinal prosthesis for vision restoration. PMID:26405885

  9. Electromechanical design and construction of a rotating radio-frequency coil system for applications in magnetic resonance.

    PubMed

    Trakic, Adnan; Weber, Ewald; Li, Bing Keong; Wang, Hua; Liu, Feng; Engstrom, Craig; Crozier, Stuart

    2012-04-01

    While recent studies have shown that rotating a single radio-frequency (RF) coil during the acquisition of magnetic resonance (MR) images provides a number of hardware advantages (i.e., requires only one RF channel, avoids coil-coil coupling and facilitates large-scale multinuclear imaging), they did not describe in detail how to build a rotating RF coil system. This paper presents detailed engineering information on the electromechanical design and construction of a MR-compatible RRFC system for human head imaging at 2 T. A custom-made (bladeless) pneumatic Tesla turbine was used to rotate the RF coil at a constant velocity, while an infrared optical encoder measured the selected frequency of rotation. Once the rotating structure was mechanically balanced and the compressed air supply suitably regulated, the maximum frequency of rotation measured ~14.5 Hz with a 2.4% frequency variation over time. MR images of a water phantom and human head were obtained using the rotating RF head coil system.

  10. Electromechanical design and construction of a rotating radio-frequency coil system for applications in magnetic resonance.

    PubMed

    Trakic, Adnan; Weber, Ewald; Li, Bing Keong; Wang, Hua; Liu, Feng; Engstrom, Craig; Crozier, Stuart

    2012-04-01

    While recent studies have shown that rotating a single radio-frequency (RF) coil during the acquisition of magnetic resonance (MR) images provides a number of hardware advantages (i.e., requires only one RF channel, avoids coil-coil coupling and facilitates large-scale multinuclear imaging), they did not describe in detail how to build a rotating RF coil system. This paper presents detailed engineering information on the electromechanical design and construction of a MR-compatible RRFC system for human head imaging at 2 T. A custom-made (bladeless) pneumatic Tesla turbine was used to rotate the RF coil at a constant velocity, while an infrared optical encoder measured the selected frequency of rotation. Once the rotating structure was mechanically balanced and the compressed air supply suitably regulated, the maximum frequency of rotation measured ~14.5 Hz with a 2.4% frequency variation over time. MR images of a water phantom and human head were obtained using the rotating RF head coil system. PMID:22231668

  11. Compact Solid State Cooling Systems: Compact MEMS Electrocaloric Module

    SciTech Connect

    2010-10-01

    BEETIT Project: UCLA is developing a novel solid-state cooling technology to translate a recent scientific discovery of the so-called giant electrocaloric effect into commercially viable compact cooling systems. Traditional air conditioners use noisy, vapor compression systems that include a polluting liquid refrigerant to circulate within the air conditioner, absorb heat, and pump the heat out into the environment. Electrocaloric materials achieve the same result by heating up when placed within an electric field and cooling down when removed—effectively pumping heat out from a cooler to warmer environment. This electrocaloric-based solid state cooling system is quiet and does not use liquid refrigerants. The innovation includes developing nano-structured materials and reliable interfaces for heat exchange. With these innovations and advances in micro/nano-scale manufacturing technologies pioneered by semiconductor companies, UCLA is aiming to extend the performance/reliability of the cooling module.

  12. Motion estimation by integrated low cost system (vision and MEMS) for positioning of a scooter "Vespa"

    NASA Astrophysics Data System (ADS)

    Guarnieri, A.; Milan, N.; Pirotti, F.; Vettore, A.

    2011-12-01

    In the automotive sector, especially in these last decade, a growing number of investigations have taken into account electronic systems to check and correct the behavior of drivers, increasing road safety. The possibility to identify with high accuracy the vehicle position in a mapping reference frame for driving directions and best-route analysis is also another topic which attracts lot of interest from the research and development sector. To reach the objective of accurate vehicle positioning and integrate response events, it is necessary to estimate time by time the position, orientation and velocity of the system. To this aim low cost GPS and MEMS (sensors can be used. In comparison to a four wheel vehicle, the dynamics of a two wheel vehicle (e.g. a scooter) feature a higher level of complexity. Indeed more degrees of freedom must be taken into account to describe the motion of the latter. For example a scooter can twist sideways, thus generating a roll angle. A slight pitch angle has to be considered as well, since wheel suspensions have a higher degree of motion with respect to four wheel vehicles. In this paper we present a method for the accurate reconstruction of the trajectory of a motorcycle ("Vespa" scooter), which can be used as alternative to the "classical" approach based on the integration of GPS and INS sensors. Position and orientation of the scooter are derived from MEMS data and images acquired by on-board digital camera. A Bayesian filter provides the means for integrating the data from MEMS-based orientation sensor and the GPS receiver.

  13. Laser-assisted advanced assembly for MEMS fabrication

    NASA Astrophysics Data System (ADS)

    Atanasov, Yuriy Andreev

    Micro Electro-Mechanical Systems (MEMS) are currently fabricated using methods originally designed for manufacturing semiconductor devices, using minimum if any assembly at all. The inherited limitations of this approach narrow the materials that can be employed and reduce the design complexity, imposing limitations on MEMS functionality. The proposed Laser-Assisted Advanced Assembly (LA3) method solves these problems by first fabricating components followed by assembly of a MEMS device. Components are micro-machined using a laser or by photolithography followed by wet/dry etching out of any material available in a thin sheet form. A wide range of materials can be utilized, including biocompatible metals, ceramics, polymers, composites, semiconductors, and materials with special properties such as memory shape alloys, thermoelectric, ferromagnetic, piezoelectric, and more. The approach proposed allows enhancing the structural and mechanical properties of the starting materials through heat treatment, tribological coatings, surface modifications, bio-functionalization, and more, a limited, even unavailable possibility with existing methods. Components are transferred to the substrate for assembly using the thermo-mechanical Selective Laser Assisted Die Transfer (tmSLADT) mechanism for microchips assembly, already demonstrated by our team. Therefore, the mechanical and electronic part of the MEMS can be fabricated using the same equipment/method. The viability of the Laser-Assisted Advanced Assembly technique for MEMS is demonstrated by fabricating magnetic switches for embedding in a conductive carbon-fiber metamaterial for use in an Electromagnetic-Responsive Mobile Cyber-Physical System (E-RMCPS), which is expected to improve the wireless communication system efficiency within a battery-powered device.

  14. Performance assessment of MEMS adaptive optics in tactical airborne systems

    NASA Astrophysics Data System (ADS)

    Tyson, Robert K.

    1999-09-01

    Tactical airborne electro-optical systems are severely constrained by weight, volume, power, and cost. Micro- electrical-mechanical adaptive optics provide a solution that addresses the engineering realities without compromising spatial and temporal compensation requirements. Through modeling and analysis, we determined that substantial benefits could be gained for laser designators, ladar, countermeasures, and missile seekers. The developments potential exists for improving seeker imagery resolution 20 percent, extending countermeasures keep-out range by a factor of 5, doubling the range for ladar detection and identification, and compensating for supersonic and hypersonic aircraft boundary layers. Innovative concepts are required for atmospheric pat hand boundary layer compensation. We have developed design that perform these tasks using high speed scene-based wavefront sensing, IR aerosol laser guide stars, and extended-object wavefront beacons. We have developed a number of adaptive optics system configurations that met the spatial resolution requirements and we have determined that sensing and signal processing requirements can be met. With the help of micromachined deformable mirrors and sensor, we will be able to integrate the systems into existing airborne pods and missiles as well as next generation electro-optical systems.

  15. CMOS-MEMS Chemiresistive and Chemicapacitive Chemical Sensor System

    NASA Astrophysics Data System (ADS)

    Lazarus, Nathan S.

    Integrating chemical sensors with testing electronics is a powerful technique with the potential to lower power and cost and allow for lower system limits of detection. This thesis explores the possibility of creating an integrated sensor system intended to be embedded within respirator cartridges to notify the user that hazardous chemicals will soon leak into the face mask. For a chemical sensor designer, this application is particularly challenging due to the need for a very sensitive and cheap sensor that will be exposed to widely varying environmental conditions during use. An octanethiol-coated gold nanoparticle chemiresistor to detect industrial solvents is developed, focusing on characterizing the environmental stability and limits of detection of the sensor. Since the chemiresistor was found to be highly sensitive to water vapor, a series of highly sensitive humidity sensor topologies were developed, with sensitivities several times previous integrated capacitive humidity sensors achieved. Circuit techniques were then explored to reduce the humidity sensor limits of detection, including the analysis of noise, charge injection, jitter and clock feedthrough in a charge-based capacitance measurement (CBCM) circuit and the design of a low noise Colpitts LC oscillator. The characterization of high resistance gold nanoclusters for capacitive chemical sensing was also performed. In the final section, a preconcentrator, a heater element intended to release a brief concentrated pulse of analate, was developed and tested for the purposes of lowering the system limit of detection.

  16. System-on-Chip Integration of a New Electromechanical Impedance Calculation Method for Aircraft Structure Health Monitoring

    PubMed Central

    Boukabache, Hamza; Escriba, Christophe; Zedek, Sabeha; Medale, Daniel; Rolet, Sebastien; Fourniols, Jean Yves

    2012-01-01

    The work reported on this paper describes a new methodology implementation for active structural health monitoring of recent aircraft parts made from carbon-fiber-reinforced polymer. This diagnosis is based on a new embedded method that is capable of measuring the local high frequency impedance spectrum of the structure through the calculation of the electro-mechanical impedance of a piezoelectric patch pasted non-permanently onto its surface. This paper involves both the laboratory based E/M impedance method development, its implementation into a CPU with limited resources as well as a comparison with experimental testing data needed to demonstrate the feasibility of flaw detection on composite materials and answer the question of the method reliability. The different development steps are presented and the integration issues are discussed. Furthermore, we present the unique advantages that the reconfigurable electronics through System-on-Chip (SoC) technology brings to the system scaling and flexibility. At the end of this article, we demonstrate the capability of a basic network of sensors mounted onto a real composite aircraft part specimen to capture its local impedance spectrum signature and to diagnosis different delamination sizes using a comparison with a baseline. PMID:23202013

  17. System-on-chip integration of a new electromechanical impedance calculation method for aircraft structure health monitoring.

    PubMed

    Boukabache, Hamza; Escriba, Christophe; Zedek, Sabeha; Medale, Daniel; Rolet, Sebastien; Fourniols, Jean Yves

    2012-10-11

    The work reported on this paper describes a new methodology implementation for active structural health monitoring of recent aircraft parts made from carbon-fiber-reinforced polymer. This diagnosis is based on a new embedded method that is capable of measuring the local high frequency impedance spectrum of the structure through the calculation of the electro-mechanical impedance of a piezoelectric patch pasted non-permanently onto its surface. This paper involves both the laboratory based E/M impedance method development, its implementation into a CPU with limited resources as well as a comparison with experimental testing data needed to demonstrate the feasibility of flaw detection on composite materials and answer the question of the method reliability. The different development steps are presented and the integration issues are discussed. Furthermore, we present the unique advantages that the reconfigurable electronics through System-on-Chip (SoC) technology brings to the system scaling and flexibility. At the end of this article, we demonstrate the capability of a basic network of sensors mounted onto a real composite aircraft part specimen to capture its local impedance spectrum signature and to diagnosis different delamination sizes using a comparison with a baseline.

  18. Nanotechnology: MEMS and NEMS and their applications to smart systems and devices

    NASA Astrophysics Data System (ADS)

    Varadan, Vijay K.

    2003-10-01

    The microelectronics industry has seen explosive growth during the last thirty years. Extremely large markets for logic and memory devices have driven the development of new materials, and technologies for the fabrication of even more complex devices with features sizes now down at the sub micron and nanometer level. Recent interest has arisen in employing these materials, tools and technologies for the fabrication of miniature sensors and actuators and their integration with electronic circuits to produce smart devices and systems. This effort offers the promise of: (1) increasing the performance and manufacturability of both sensors and actuators by exploiting new batch fabrication processes developed including micro stereo lithographic and micro molding techniques; (2) developing novel classes of materials and mechanical structures not possible previously, such as diamond like carbon, silicon carbide and carbon nanotubes, micro-turbines and micro-engines; (3) development of technologies for the system level and wafer level integration of micro components at the nanometer precision, such as self-assembly techniques and robotic manipulation; (4) development of control and communication systems for MEMS devices, such as optical and RF wireless, and power delivery systems, etc. A novel composite structure can be tailored by functionalizing carbon nano tubes and chemically bonding them with the polymer matrix e.g. block or graft copolymer, or even cross-linked copolymer, to impart exceptional structural, electronic and surface properties. Bio- and Mechanical-MEMS devices derived from this hybrid composite provide a new avenue for future smart systems. The integration of NEMS (NanoElectroMechanical Systems), MEMS, IDTs (Interdigital Transducers) and required microelectronics and conformal antenna in the multifunctional smart materials and composites results in a smart system suitable for sending and control of a variety functions in automobile, aerospace, marine and

  19. RF MEMS and Their Applications in NASA's Space Communication Systems

    NASA Technical Reports Server (NTRS)

    Williams, W. Daniel; Ponchak, George E.; Simons, Rainee N.; Zaman, Afroz; Kory, Carol; Wintucky, Edwin; Wilson, Jeffrey D.; Scardelletti, Maximilian; Lee, Richard; Nguyen, Hung

    2001-01-01

    Radio frequency (RF) and microwave communication systems rely on frequency, amplitude, and phase control circuits to efficiently use the available spectrum. Phase control circuits are required for electronically scanning phase array antennas that enable radiation pattern shaping, scanning, and hopping. Two types of phase shifters, which are the phase control circuits, are most often used. The first is comprised of two circuits with different phase characteristics such as two transmission lines of different lengths or a high pass and low pass filter and a switch that directs the RF power through one of the two circuits. Alternatively, a variable capacitor, or varactor, is used to change the effective electrical path length of a transmission line, which changes the phase characteristics. Filter banks are required for the diplexer at the front end of wide band communication satellites. These filters greatly increase the size and mass of the RF/microwave systems, but smaller diplexers may be made with a low loss varactor or a group of capacitors, a switch and an inductor.

  20. Microelectromechanical Systems

    NASA Technical Reports Server (NTRS)

    Gabriel, Kaigham J.

    1995-01-01

    Micro-electromechanical systems (MEMS) is an enabling technology that merges computation and communication with sensing and actuation to change the way people and machines interact with the physical world. MEMS is a manufacturing technology that will impact widespread applications including: miniature inertial measurement measurement units for competent munitions and personal navigation; distributed unattended sensors; mass data storage devices; miniature analytical instruments; embedded pressure sensors; non-invasive biomedical sensors; fiber-optics components and networks; distributed aerodynamic control; and on-demand structural strength. The long term goal of ARPA's MEMS program is to merge information processing with sensing and actuation to realize new systems and strategies for both perceiving and controlling systems, processes, and the environment. The MEMS program has three major thrusts: advanced devices and processes, system design, and infrastructure.

  1. Control of MEMS-based actuator array for micro smart systems

    NASA Astrophysics Data System (ADS)

    Chapuis, Yves-Andre; Fukuta, Yamato; Zhou, Lingfei; Mita, Yoshio; Fujita, Hiroyuki

    2005-02-01

    In the present work, the authors were focused on control modes used in distributed microsystems. Especially, they studied distributed manipulation like motion active surface that have been an important topic in micro and nanofabrication field. After comparing advantages and drawbacks between centralized, decentralized and distributed control systems, they decided to apply the control mode to an airflow active surface based on pneumatic microactuator array, and fabricated by MEMS technology. The size of the device is about 35x35 mm2 for 560 MEMS-based actuators and holes respectively at the front- and the back-side of the silicon substrate. In a first approach, and to overcome fabrication problems of the micro-smart system, combining electronic and electro mechanic elements, a co-design software/hardware solution was implemented. By this way, and using a digital image captured from a CCD camera, autonomy of the distributed microsystems could be developed. Afterward, a feedback control strategy was elaborated by applying principles of autonomous mobile robots that lend it to. A first prototype, validating all control mode principles was successfully implemented directly in software. Experiment results demonstrated advantages and good performances of the method.

  2. Design and experimental results for a compact laser printer optical system with MEMS scanning mirror

    NASA Astrophysics Data System (ADS)

    Suzuki, Takatoshi; Seki, Daisuke; Fujii, Shuichi; Mukai, Yukihiro

    2010-02-01

    There are many features expected by printer users, which include high resolution, low price, compact size, color, high speed printing and so on. Laser printers generally utilize a polygon mirror as a reflector in their optical configurations, but the usual size of the polygon mirror prevents laser scanning unit from being made much smaller. We have been conducting research on techniques which can contribute to reducing the optical unit size. Although oscillating mirror made with MEMS technology enables the system to be compact, it requires a sophisticated optical design having an increased number of constraints due to the change in angular velocity which varies depending on the orientation of the mirror, while the polygon mirror allows the scanning with constant speed. Using a small MEMS mirror is one of the critical issues concerning the reduction of cost. We have successfully resolved all the challenges listed above by using high-precision free-form optical surfaces and an optical layout making efficient use of 3D space. Our techniques can make the unit size much smaller and reduce the price. The optical path is designed to have a ray passing through a lens twice. We report both theoretical and experimental results for this system.

  3. In situ electron microscopy studies of electromechanical behavior in metals at the nanoscale using a novel microdevice-based system

    NASA Astrophysics Data System (ADS)

    Kang, Wonmo; Beniam, Iyoel; Qidwai, Siddiq M.

    2016-09-01

    Electrically assisted deformation (EAD) is an emerging technique to enhance formability of metals by applying an electric current through them. Despite its increasing importance in manufacturing applications, there is still an unresolved debate on the nature of the fundamental deformation mechanisms underlying EAD, mainly between electroplasticity (non-thermal effects) and resistive heating (thermal effects). This status is due to two critical challenges: (1) a lack of experimental techniques to directly observe fundamental mechanisms of material deformation during EAD, and (2) intrinsic coupling between electric current and Joule heating giving rise to unwanted thermally activated mechanisms. To overcome these challenges, we have developed a microdevice-based electromechanical testing system (MEMTS) to characterize nanoscale metal specimens in transmission electron microscopy (TEM). Our studies reveal that MEMTS eliminates the effect of Joule heating on material deformation, a critical advantage over macroscopic experiments, owing to its unique scale. For example, a negligible change in temperature (<0.02 °C) is predicted at ˜3500 A/mm2. Utilizing the attractive features of MEMTS, we have directly investigated potential electron-dislocation interactions in single crystal copper (SCC) specimens that are simultaneously subjected to uniaxial loading and electric current density up to 5000 A/mm2. Our in situ TEM studies indicate that for SCC, electroplasticity does not play a key role as no differences in dislocation activities, such as depinning and movement, are observed.

  4. Implantable centrifugal blood pump with dual impeller and double pivot bearing system: electromechanical actuator, prototyping, and anatomical studies.

    PubMed

    Bock, Eduardo; Antunes, Pedro; Leao, Tarcisio; Uebelhart, Beatriz; Fonseca, Jeison; Leme, Juliana; Utiyama, Bruno; da Silva, Cibele; Cavalheiro, Andre; Filho, Diolino Santos; Dinkhuysen, Jarbas; Biscegli, Jose; Andrade, Aron; Arruda, Celso

    2011-05-01

    An implantable centrifugal blood pump has been developed with original features for a left ventricular assist device. This pump is part of a multicenter and international study with the objective to offer simple, affordable, and reliable devices to developing countries. Previous computational fluid dynamics investigations and wear evaluation in bearing system were performed followed by prototyping and in vitro tests. In addition, previous blood tests for assessment of normalized index of hemolysis show results of 0.0054±2.46 × 10⁻³ mg/100 L. An electromechanical actuator was tested in order to define the best motor topology and controller configuration. Three different topologies of brushless direct current motor (BLDCM) were analyzed. An electronic driver was tested in different situations, and the BLDCM had its mechanical properties tested in a dynamometer. Prior to evaluation of performance during in vivo animal studies, anatomical studies were necessary to achieve the best configuration and cannulation for left ventricular assistance. The results were considered satisfactory, and the next step is to test the performance of the device in vivo.

  5. Benefits of combined GPS/GLONASS with low-cost MEMS IMUs for vehicular urban navigation.

    PubMed

    Angrisano, Antonio; Petovello, Mark; Pugliano, Giovanni

    2012-01-01

    The integration of Global Navigation Satellite Systems (GNSS) with Inertial Navigation Systems (INS) has been very actively researched for many years due to the complementary nature of the two systems. In particular, during the last few years the integration with micro-electromechanical system (MEMS) inertial measurement units (IMUs) has been investigated. In fact, recent advances in MEMS technology have made possible the development of a new generation of low cost inertial sensors characterized by small size and light weight, which represents an attractive option for mass-market applications such as vehicular and pedestrian navigation. However, whereas there has been much interest in the integration of GPS with a MEMS-based INS, few research studies have been conducted on expanding this application to the revitalized GLONASS system. This paper looks at the benefits of adding GLONASS to existing GPS/INS(MEMS) systems using loose and tight integration strategies. The relative benefits of various constraints are also assessed. Results show that when satellite visibility is poor (approximately 50% solution availability) the benefits of GLONASS are only seen with tight integration algorithms. For more benign environments, a loosely coupled GPS/GLONASS/INS system offers performance comparable to that of a tightly coupled GPS/INS system, but with reduced complexity and development time. PMID:22666079

  6. Benefits of Combined GPS/GLONASS with Low-Cost MEMS IMUs for Vehicular Urban Navigation

    PubMed Central

    Angrisano, Antonio; Petovello, Mark; Pugliano, Giovanni

    2012-01-01

    The integration of Global Navigation Satellite Systems (GNSS) with Inertial Navigation Systems (INS) has been very actively researched for many years due to the complementary nature of the two systems. In particular, during the last few years the integration with micro-electromechanical system (MEMS) inertial measurement units (IMUs) has been investigated. In fact, recent advances in MEMS technology have made possible the development of a new generation of low cost inertial sensors characterized by small size and light weight, which represents an attractive option for mass-market applications such as vehicular and pedestrian navigation. However, whereas there has been much interest in the integration of GPS with a MEMS-based INS, few research studies have been conducted on expanding this application to the revitalized GLONASS system. This paper looks at the benefits of adding GLONASS to existing GPS/INS(MEMS) systems using loose and tight integration strategies. The relative benefits of various constraints are also assessed. Results show that when satellite visibility is poor (approximately 50% solution availability) the benefits of GLONASS are only seen with tight integration algorithms. For more benign environments, a loosely coupled GPS/GLONASS/INS system offers performance comparable to that of a tightly coupled GPS/INS system, but with reduced complexity and development time. PMID:22666079

  7. Benefits of combined GPS/GLONASS with low-cost MEMS IMUs for vehicular urban navigation.

    PubMed

    Angrisano, Antonio; Petovello, Mark; Pugliano, Giovanni

    2012-01-01

    The integration of Global Navigation Satellite Systems (GNSS) with Inertial Navigation Systems (INS) has been very actively researched for many years due to the complementary nature of the two systems. In particular, during the last few years the integration with micro-electromechanical system (MEMS) inertial measurement units (IMUs) has been investigated. In fact, recent advances in MEMS technology have made possible the development of a new generation of low cost inertial sensors characterized by small size and light weight, which represents an attractive option for mass-market applications such as vehicular and pedestrian navigation. However, whereas there has been much interest in the integration of GPS with a MEMS-based INS, few research studies have been conducted on expanding this application to the revitalized GLONASS system. This paper looks at the benefits of adding GLONASS to existing GPS/INS(MEMS) systems using loose and tight integration strategies. The relative benefits of various constraints are also assessed. Results show that when satellite visibility is poor (approximately 50% solution availability) the benefits of GLONASS are only seen with tight integration algorithms. For more benign environments, a loosely coupled GPS/GLONASS/INS system offers performance comparable to that of a tightly coupled GPS/INS system, but with reduced complexity and development time.

  8. Nanotechnology and MEMS-based systems for civil infrastructure safety and security: Opportunities and challenges

    NASA Astrophysics Data System (ADS)

    Robinson, Nidia; Saafi, Mohamed

    2006-03-01

    Critical civil infrastructure systems such as bridges, high rises, dams, nuclear power plants and pipelines present a major investment and the health of the United States' economy and the lifestyle of its citizens both depend on their safety and security. The challenge for engineers is to maintain the safety and security of these large structures in the face of terrorism threats, natural disasters and long-term deterioration, as well as to meet the demands of emergency response times. With the significant negative impact that these threats can have on the structural environment, health monitoring of civil infrastructure holds promise as a way to provide information for near real-time condition assessment of the structure's safety and security. This information can be used to assess the integrity of the structure for post-earthquake and terrorist attacks rescue and recovery, and to safely and rapidly remove the debris and to temporary shore specific structural elements. This information can also be used for identification of incipient damage in structures experiencing long-term deterioration. However, one of the major obstacles preventing sensor-based monitoring is the lack of reliable, easy-to-install, cost-effective and harsh environment resistant sensors that can be densely embedded into large-scale civil infrastructure systems. Nanotechnology and MEMS-based systems which have matured in recent years represent an innovative solution to current damage detection systems, leading to wireless, inexpensive, durable, compact, and high-density information collection. In this paper, ongoing research activities at Alabama A&M University (AAMU) Center for Transportation Infrastructure Safety and Security on the application of nanotechnology and MEMS to Civil Infrastructure for health monitoring will presented. To date, research showed that nanotechnology and MEMS-based systems can be used to wirelessly detect and monitor different damage mechanisms in concrete structures

  9. MEMS electrostatic vibration energy harvester without switches and inductive elements

    NASA Astrophysics Data System (ADS)

    Dorzhiev, V.; Karami, A.; Basset, P.; Dragunov, V.; Galayko, D.

    2014-11-01

    The paper is devoted to a novel study of monophase MEMS electrostatic Vibration Energy Harvester (e-VEH) with conditioning circuit based on Bennet's doubler. Unlike the majority of conditioning circuits that charge a power supply, the circuit based on Bennet's doubler is characterized by the absence of switches requiring additional control electronics, and is free from hardly compatible with batch fabrication process inductive elements. Our experiment with a 0.042 cm3 batch fabricated MEMS e-VEH shows that a pre-charged capacitor as a power supply causes a voltage increase, followed by a saturation which was not reported before. This saturation is due to the nonlinear dynamics of the system and the electromechanical damping that is typical for MEMS. It has been found that because of that coupled behavior there exists an optimal power supply voltage at which output power is maximum. At 187 Hz / 4 g external vibrations the system is shown to charge a 12 V supply with a output power of 1.8 μW.

  10. Improving planetary rover attitude estimation via MEMS sensor characterization.

    PubMed

    Hidalgo, Javier; Poulakis, Pantelis; Köhler, Johan; Del-Cerro, Jaime; Barrientos, Antonio

    2012-01-01

    Micro Electro-Mechanical Systems (MEMS) are currently being considered in the space sector due to its suitable level of performance for spacecrafts in terms of mechanical robustness with low power consumption, small mass and size, and significant advantage in system design and accommodation. However, there is still a lack of understanding regarding the performance and testing of these new sensors, especially in planetary robotics. This paper presents what is missing in the field: a complete methodology regarding the characterization and modeling of MEMS sensors with direct application. A reproducible and complete approach including all the intermediate steps, tools and laboratory equipment is described. The process of sensor error characterization and modeling through to the final integration in the sensor fusion scheme is explained with detail. Although the concept of fusion is relatively easy to comprehend, carefully characterizing and filtering sensor information is not an easy task and is essential for good performance. The strength of the approach has been verified with representative tests of novel high-grade MEMS inertia sensors and exemplary planetary rover platforms with promising results.

  11. Improving planetary rover attitude estimation via MEMS sensor characterization.

    PubMed

    Hidalgo, Javier; Poulakis, Pantelis; Köhler, Johan; Del-Cerro, Jaime; Barrientos, Antonio

    2012-01-01

    Micro Electro-Mechanical Systems (MEMS) are currently being considered in the space sector due to its suitable level of performance for spacecrafts in terms of mechanical robustness with low power consumption, small mass and size, and significant advantage in system design and accommodation. However, there is still a lack of understanding regarding the performance and testing of these new sensors, especially in planetary robotics. This paper presents what is missing in the field: a complete methodology regarding the characterization and modeling of MEMS sensors with direct application. A reproducible and complete approach including all the intermediate steps, tools and laboratory equipment is described. The process of sensor error characterization and modeling through to the final integration in the sensor fusion scheme is explained with detail. Although the concept of fusion is relatively easy to comprehend, carefully characterizing and filtering sensor information is not an easy task and is essential for good performance. The strength of the approach has been verified with representative tests of novel high-grade MEMS inertia sensors and exemplary planetary rover platforms with promising results. PMID:22438761

  12. Improving Planetary Rover Attitude Estimation via MEMS Sensor Characterization

    PubMed Central

    Hidalgo, Javier; Poulakis, Pantelis; Köhler, Johan; Del-Cerro, Jaime; Barrientos, Antonio

    2012-01-01

    Micro Electro-Mechanical Systems (MEMS) are currently being considered in the space sector due to its suitable level of performance for spacecrafts in terms of mechanical robustness with low power consumption, small mass and size, and significant advantage in system design and accommodation. However, there is still a lack of understanding regarding the performance and testing of these new sensors, especially in planetary robotics. This paper presents what is missing in the field: a complete methodology regarding the characterization and modeling of MEMS sensors with direct application. A reproducible and complete approach including all the intermediate steps, tools and laboratory equipment is described. The process of sensor error characterization and modeling through to the final integration in the sensor fusion scheme is explained with detail. Although the concept of fusion is relatively easy to comprehend, carefully characterizing and filtering sensor information is not an easy task and is essential for good performance. The strength of the approach has been verified with representative tests of novel high-grade MEMS inertia sensors and exemplary planetary rover platforms with promising results. PMID:22438761

  13. Environmental Monitoring System for Home-Delivery Service of Packages by Using MEMS Sensors

    NASA Astrophysics Data System (ADS)

    Fujita, Takayuki; Masaki, Kentaro; Maenaka, Kazusuke

    Nowadays, home-delivery services of packages are imperative in everyday life. These service industries are trying to provide cheaper, faster and safer service. However, package condition and handling during transportation are not disclosed to a customer. In this study, we realized a prototype system by MEMS technology for measuring the environmental conditions around a package for home-delivery service. The system includes barometric pressure, temperature, relative humidity and three dimensional acceleration (shock) sensing devices, as well as an interface circuitry. The system is a size of 115 × 54 × 10 mm3 and a weight of 50 g. We measured the package conditions during the transportation by three Japanese domestic home-delivery services, and using data mining, we were able to obtain a representation of the package's circumstances.

  14. MEMS-based flow cytometry: microfluidics-based cell identification system by fluorescent imaging.

    PubMed

    Wu, W K; Liang, C K; Huang, J Z

    2004-01-01

    This study utilizes MEMS technology to realize a novel low-cost microfluidics-based biochip system for flow-type cell handling. Powered by vacuum pump, the microfluidic driving system enables cells to move in order one by one in the biochip by an effect of sheath flow prefocus. Then, cells are guided to a fluorescent inspection region where two detection tasks such as cell image identification and cell counting are conducted. Currently, the glass-based biochip has been manufactured and all the related devices have been well set up in our laboratory. With this proposed prototype system, typical results about cell separation of yeast cell and PC-3 cell are available and their separated images are also presented, respectively. PMID:17270801

  15. MEMS technologies for rf communications

    NASA Astrophysics Data System (ADS)

    Wu, Qun; Kim, B. K.

    2001-04-01

    Microelectromechanical system (MEMS) represents an exciting new technology derived from the same fabricating processes used to make integrated circuits. The trends of growing importance of the wireless communications market is toward the system with minimal size, cost and power consumption. For the purpose of MEMS R&D used for wireless communications, a history and present situation of MEMS device development are reviewed in this paper, and an overview of MEMS research topics on RF communication applications and the state of the art technologies are also presented here.

  16. MEMS Rate Sensors for Space

    NASA Technical Reports Server (NTRS)

    Gambino, Joel P.

    1999-01-01

    Micromachined Electro Mechanical System Rate sensors offer many advantages that make them attractive for space use. They are smaller, consume less power, and cost less than the systems currently available. MEMS Rate Sensors however, have not been optimized for use on spacecraft. This paper describes an approach to developing MEMS Rate Sensors systems for space use.

  17. EMMA: Electromechanical Modeling in ALEGRA

    SciTech Connect

    1996-12-31

    To ensure high levels of deterrent capability in the 21st century, new stockpile stewardship principles are being embraced at Sandia National Laboratories. The Department of Energy Accelerated Strategic Computing Initiative (ASCI) program is providing the computational capacity and capability as well as funding the system and simulation software infrastructure necessary to provide accurate, precise and predictive modeling of important components and devices. An important class of components require modeling of piezoelectric and ferroceramic materials. The capability to run highly resolved simulations of these types of components on the ASCI parallel computers is being developed at Sandia in the ElectroMechanical Modeling in Alegra (EMMA) code. This a simulation capability being developed at Sandia National Laboratories for high-fidelity modeling of electromechanical devices. these devices can produce electrical current arising from material changes due to shock impact or explosive detonation.

  18. Micro-electro-mechanical system (MEMS)-based fiber optic sensor and sensor network for improving weapon stabilization and fire control

    NASA Astrophysics Data System (ADS)

    Zhang, Sean Z.; Xu, Guoda; Qiu, Wei; Lin, Freddie S.; Testa, Robert C.; Mattice, Michael S.

    2000-08-01

    A MicroElectroMechanical Systems (MEMS)-based fiber optic sensor and sensor network for improving weapon stabilization and fire control have been developed. Fabrication involves overwriting two fiber Bragg gratings (FBGs) onto a polarization-preserving optical fiber core. A MEMS diaphragm is fabricated and integrated with the overlaid FBGs to enhance the performance and reliability of the sensor. A simulation model for the MEMS fiber optic sensor and sensor network has been derived, and simulation results concerning load, angle, strain, and temperature have been obtained. The fabricated MEMS diaphragm and the overlaid FBGs have been packaged together on the basis of simulation results and mounted on a specially designed cantilever system. The combined multifunctional MEMS fiber optic sensor and sensor network is cost-effective, fast, rugged enough to operate in harsh environmental conditions, compact, and highly sensitive.

  19. Design of Small MEMS Microphone Array Systems for Direction Finding of Outdoors Moving Vehicles

    PubMed Central

    Zhang, Xin; Huang, Jingchang; Song, Enliang; Liu, Huawei; Li, Baoqing; Yuan, Xiaobing

    2014-01-01

    In this paper, a MEMS microphone array system scheme is proposed which implements real-time direction of arrival (DOA) estimation for moving vehicles. Wind noise is the primary source of unwanted noise on microphones outdoors. A multiple signal classification (MUSIC) algorithm is used in this paper for direction finding associated with spatial coherence to discriminate between the wind noise and the acoustic signals of a vehicle. The method is implemented in a SHARC DSP processor and the real-time estimated DOA is uploaded through Bluetooth or a UART module. Experimental results in different places show the validity of the system and the deviation is no bigger than 6° in the presence of wind noise. PMID:24603636

  20. Design of small MEMS microphone array systems for direction finding of outdoors moving vehicles.

    PubMed

    Zhang, Xin; Huang, Jingchang; Song, Enliang; Liu, Huawei; Li, Baoqing; Yuan, Xiaobing

    2014-01-01

    In this paper, a MEMS microphone array system scheme is proposed which implements real-time direction of arrival (DOA) estimation for moving vehicles. Wind noise is the primary source of unwanted noise on microphones outdoors. A multiple signal classification (MUSIC) algorithm is used in this paper for direction finding associated with spatial coherence to discriminate between the wind noise and the acoustic signals of a vehicle. The method is implemented in a SHARC DSP processor and the real-time estimated DOA is uploaded through Bluetooth or a UART module. Experimental results in different places show the validity of the system and the deviation is no bigger than 6° in the presence of wind noise.

  1. Attitude Heading Reference System Using MEMS Inertial Sensors with Dual-Axis Rotation

    PubMed Central

    Kang, Li; Ye, Lingyun; Song, Kaichen; Zhou, Yang

    2014-01-01

    This paper proposes a low cost and small size attitude and heading reference system based on MEMS inertial sensors. A dual-axis rotation structure with a proper rotary scheme according to the design principles is applied in the system to compensate for the attitude and heading drift caused by the large gyroscope biases. An optimization algorithm is applied to compensate for the installation angle error between the body frame and the rotation table's frame. Simulations and experiments are carried out to evaluate the performance of the AHRS. The results show that the proper rotation could significantly reduce the attitude and heading drifts. Moreover, the new AHRS is not affected by magnetic interference. After the rotation, the attitude and heading are almost just oscillating in a range. The attitude error is about 3° and the heading error is less than 3° which are at least 5 times better than the non-rotation condition. PMID:25268911

  2. Low-Loss, High-Isolation Microwave Microelectromechanical Systems (MEMS) Switches Being Developed

    NASA Technical Reports Server (NTRS)

    Ponchak, George E.

    2002-01-01

    Switches, electrical components that either permit or prevent the flow of electricity, are the most important and widely used electrical devices in integrated circuits. In microwave systems, switches are required for switching between the transmitter and receiver; in communication systems, they are needed for phase shifters in phased-array antennas, for radar and communication systems, and for the new class of digital or software definable radios. Ideally, switches would be lossless devices that did not depend on the electrical signal's frequency or power, and they would not consume electrical power to change from OFF to ON or to maintain one of these two states. Reality is quite different, especially at microwave frequencies. Typical switches in microwave integrated circuits are pin diodes or gallium arsenide (GaAs) field-effect transistors that are nonlinear, with characteristics that depend on the power of the signal. In addition, they are frequency-dependent, lossy, and require electrical power to maintain a certain state. A new type of component has been developed that overcomes most of these technical difficulties. Microelectromechanical (MEMS) switches rely on mechanical movement as a response to an applied electrical force to either transmit or reflect electrical signal power. The NASA Glenn Research Center has been actively developing MEMS for microwave applications for over the last 5 years. Complete fabrication procedures have been developed so that the moving parts of the switch can be released with near 100-percent yield. Moreover, the switches fabricated at Glenn have demonstrated state-of-the-art performance. A typical MEMS switch is shown. The switch extends over the signal and ground lines of a finite ground coplanar waveguide, a commonly used microwave transmission line. In the state shown, the switch is in the UP state and all the microwave power traveling along the transmission line proceeds unimpeded. When a potential difference is applied

  3. A variational formulation describing the attractors of some open, dissipative, electromechanical systems

    NASA Astrophysics Data System (ADS)

    Dueweke, Michael John

    1997-12-01

    In this thesis, we present new theoretical and experimental work on the dynamics and attractors of open systems of conducting particles under the influence of an electric current. We establish a variational formulation which describes a minimized scalar function in these open systems. We demonstrate, in some cases, that the quantity minimized is the physical resistance of the system. This approach is used to explain the formation of self- assembling wires and of stable fractal patterns. In addition, we argue that an analogous function is minimized in a system of thermal conductors in random motion, yielding a dendritic attractor.

  4. On electrostatically actuated NEMS/MEMS circular plates

    NASA Astrophysics Data System (ADS)

    Caruntu, Dumitru I.; Alvarado, Iris

    2011-04-01

    This paper deals with electrostatically actuated micro and nano-electromechanical (MEMS/NEMS) circular plates. The system under investigation consists of two bodies, a deformable and conductive circular plate placed above a fixed, rigid and conductive ground plate. The deformable circular plate is electrostatically actuated by applying an AC voltage between the two plates. Nonlinear parametric resonance and pull-in occur at certain frequencies and relatively large AC voltage, respectively. Such phenomena are useful for applications such as sensors, actuators, switches, micro-pumps, micro-tweezers, chemical and mass sensing, and micro-mirrors. A mathematical model of clamped circular MEMS/NEMS electrostatically actuated plates has been developed. Since the model is in the micro- and nano-scale, surface forces, van der Waals and/or Casimir, acting on the plate are included. A perturbation method, the Method of Multiple Scales (MMS), is used for investigating the case of weakly nonlinear MEMS/NEMS circular plates. Two time scales, fast and slow, are considered in this work. The amplitude-frequency and phase-frequency response of the plate in the case of primary resonance are obtained and discussed.

  5. Controlling Variable Emittance (MEMS) Coatings for Space Applications

    NASA Technical Reports Server (NTRS)

    Farrar, D.; Schneider, W.; Osiander, R.; Champion, J. L.; Darrin, A. G.; Douglas, Donya; Swanson, Ted D.

    2003-01-01

    Small spacecraft, including micro and nanosats, as they are envisioned for future missions, will require an alternative means to achieve thermal control due to their small power and mass budgets. One of the proposed alternatives is Variable Emittance (Vari-E) Coatings for spacecraft radiators. Space Technology-5 (ST-5) is a technology demonstration mission through NASA Goddard Space Flight Center (GSFC) that will utilize Vari-E Coatings. This mission involves a constellation of three (3) satellites in a highly elliptical orbit with a perigee altitude of approximately 200 kilometers and an apogee of approximately 38,000 kilometers. Such an environment will expose the spacecraft to a wide swing in the thermal and radiation environment of the earth's atmosphere. There are three (3) different technologies associated with this mission. The three technologies are electrophoretic, electrochromic, and Micro ElectroMechanical Systems (MEMS). The ultimate goal is to make use of Van-E coatings, in order to achieve various levels of thermal control. The focus of this paper is to highlight the Vari-E Coating MEMS instrument, with an emphasis on the Electronic Control Unit responsible for operating the MEMS device. The Test & Evaluation approach, along with the results, is specific for application on ST-5, yet the information provides a guideline for future experiments and/or thermal applications on the exterior structure of a spacecraft.

  6. High temperature measurement set-up for the electro-mechanical characterization of robust thin film systems

    NASA Astrophysics Data System (ADS)

    Fricke, S.; Friedberger, A.; Seidel, H.; Schmid, U.

    2014-01-01

    Due to economic and environmental requirements there is a strong need both to increase the efficiency and to monitor the actual status of gas turbines, rocket engines and deep drilling systems. For these applications, micromachined pressure sensors based on a robust substrate material (e.g. sapphire) as well as strain gauges made of platinum for long-term stable operation are regarded as most promising to withstand harsh environments such as high temperature levels, aggressive media and/or high pressure loads. For pre-evaluation purposes, a novel, custom-built measurement set-up is presented allowing the determination of electro-mechanical thin film properties up to 850 °C. Key components of the measurement set-up are the one-sided clamped beam made of Al2O3 ceramics which is deflected by a quartz rod and a high precision encoder-controlled dc motor to drive the quartz rod. The specific arrangement of the infrared halogen heaters in combination with the gold coated quartz half shells ensures a high degree of temperature homogeneity along the beam axis. When exposed to tensile as well as compressive load conditions, the corresponding gauge factor values of 1 µm thick platinum thin films show a good comparison at room temperature and in the temperature range from 600 up to 850 °C where the effects originating from grain boundaries or from the film surfaces are negligible. Between 150 and 600 °C, however, a strong deviation in the gauge factor determination depending on the mechanical load condition is observed, which is attributed to the gliding of adjacent grains.

  7. MEMS in microfluidic channels.

    SciTech Connect

    Ashby, Carol Iris Hill; Okandan, Murat; Michalske, Terry A.; Sounart, Thomas L.; Matzke, Carolyn M.

    2004-03-01

    Microelectromechanical systems (MEMS) comprise a new class of devices that include various forms of sensors and actuators. Recent studies have shown that microscale cantilever structures are able to detect a wide range of chemicals, biomolecules or even single bacterial cells. In this approach, cantilever deflection replaces optical fluorescence detection thereby eliminating complex chemical tagging steps that are difficult to achieve with chip-based architectures. A key challenge to utilizing this new detection scheme is the incorporation of functionalized MEMS structures within complex microfluidic channel architectures. The ability to accomplish this integration is currently limited by the processing approaches used to seal lids on pre-etched microfluidic channels. This report describes Sandia's first construction of MEMS instrumented microfluidic chips, which were fabricated by combining our leading capabilities in MEMS processing with our low-temperature photolithographic method for fabricating microfluidic channels. We have explored in-situ cantilevers and other similar passive MEMS devices as a new approach to directly sense fluid transport, and have successfully monitored local flow rates and viscosities within microfluidic channels. Actuated MEMS structures have also been incorporated into microfluidic channels, and the electrical requirements for actuation in liquids have been quantified with an elegant theory. Electrostatic actuation in water has been accomplished, and a novel technique for monitoring local electrical conductivities has been invented.

  8. Fabrication and integration of permanent magnet materials into MEMS transducers

    NASA Astrophysics Data System (ADS)

    Wang, Naigang

    Microscale permanent magnets (PM) are a key building block for magnetically based microelectromechanical systems (MEMS), such as sensors, actuators, and energy converters. However, the inability to concurrently achieve good magnetic properties and an integrated magnet fabrication process hinders the development of magnetic MEMS. To address this need, this dissertation develops methods for wafer-level microfabrication of thick (10--500+ microm), high-performance, permanent magnets using low-temperature (<180 °C) process steps. These methods and materials are then used to demonstrate fully batch-fabricated magnetic MEMS transducers. Two methods to fabricate micromagnets are developed: electroplating of Co-rich Co-Pt magnets into photoresist-defined molds and micro-packing of rare-earth magnetic powders to form wax-bonded magnets embedded in silicon. Patterned micromagnets with excellent magnetic properties and process-flow compatibility are demonstrated. Electroplated Co-Pt micromagnets with thickness up to 10 microm exhibit out-of-plane anisotropy with coercivities and energy products of 330 kA/m and 69 kJ/m3, respectively. Wax-bonded Nd-Fe-B micromagnets (500 x 500 x 320 microm3) exhibit a coercivity of 737 kA/m and a maximum energy product of 17 kJ/m3 with isotopic behavior. The wax-bonded powder magnets are then integrated into MEMS fabrication processes to batch-fabricate various electrodynamic transducer prototypes. A cantilever-type microtransducer achieves a 2.7 microm vertical deflection at a driving current of 5.5 mArms at 100 Hz. A piston-type transducer with elastomeric membrane obtains a 2.2 microm vertical displacement at a driving current of 670 mArms at 200 Hz. These devices demonstrate the integrability of wax-bonded Nd-Fe-B powder magnets into microscale electromechanical transducers. Electromechanical lumped element models are then developed for the piston-type electrodynamic actuators. The models enable prediction of the device performance as an

  9. Electromechanical systems with transient high power response operating from a resonant ac link

    NASA Technical Reports Server (NTRS)

    Burrows, Linda M.; Hansen, Irving G.

    1992-01-01

    The combination of an inherently robust asynchronous (induction) electrical machine with the rapid control of energy provided by a high frequency resonant ac link enables the efficient management of higher power levels with greater versatility. This could have a variety of applications from launch vehicles to all-electric automobiles. These types of systems utilize a machine which is operated by independent control of both the voltage and frequency. This is made possible by using an indirect field-oriented control method which allows instantaneous torque control all four operating quadrants. Incorporating the ac link allows the converter in these systems to switch at the zero crossing of every half cycle of the ac waveform. This zero loss switching of the link allows rapid energy variations to be achieved without the usual frequency proportional switching loss. Several field-oriented control systems were developed under contract to NASA.

  10. A Step Made Toward Designing Microelectromechanical System (MEMS) Structures With High Reliability

    NASA Technical Reports Server (NTRS)

    Nemeth, Noel N.

    2003-01-01

    The mechanical design of microelectromechanical systems-particularly for micropower generation applications-requires the ability to predict the strength capacity of load-carrying components over the service life of the device. These microdevices, which typically are made of brittle materials such as polysilicon, show wide scatter (stochastic behavior) in strength as well as a different average strength for different sized structures (size effect). These behaviors necessitate either costly and time-consuming trial-and-error designs or, more efficiently, the development of a probabilistic design methodology for MEMS. Over the years, the NASA Glenn Research Center s Life Prediction Branch has developed the CARES/Life probabilistic design methodology to predict the reliability of advanced ceramic components. In this study, done in collaboration with Johns Hopkins University, the ability of the CARES/Life code to predict the reliability of polysilicon microsized structures with stress concentrations is successfully demonstrated.

  11. Enhancing the force capability of permanent magnet latching actuators for electromechanical valve actuation systems

    NASA Astrophysics Data System (ADS)

    Rens, J.; Clark, R. E.; Jewell, G. W.; Howe, D.

    2005-05-01

    This article introduces a topology of parallel-polarized permanent magnet latching actuator for use in electromagnetic valve actuation systems for internal combustion engines. The actuator has a number of advantages over reluctance actuators, commonly employed in such systems, in terms of reduced starting currents and fail-safe capability. The influence of a number of design features on actuator performance, such as tooth tapering, additional magnets to improve the main magnet flux path and prevent the onset of saturation, and mechanical clearances required to protect the permanent magnet from shock loads are investigated. The design study findings are verified by measurements on a prototype actuator.

  12. End-coupled optical waveguide MEMS devices in the indium phosphide material system

    NASA Astrophysics Data System (ADS)

    Pruessner, Marcel W.; Siwak, Nathan; Amarnath, Kuldeep; Kanakaraju, S.; Chuang, Wen-Hsien; Ghodssi, Reza

    2006-04-01

    We demonstrate electrostatically actuated end-coupled optical waveguide devices in the indium phosphide (InP) material system. The design of a suitable layer structure and fabrication process for actuated InP-based waveguide micro-electro-mechanical systems (MEMS) is reviewed. Critical issues for optical design, such as coupling losses, are discussed and their effect on device performance is evaluated. Several end-coupled waveguide devices are demonstrated, including 1 × 2 optical switches and resonant sensors with integrated optical readout. The 1 × 2 optical switches exhibit low-voltage operation (<7 V), low crosstalk (-26 dB), reasonable loss (3.2 dB) and switching speed suitable for network restoration applications (140 µs, 2 ms settling time). Experimental characterization of the integrated cantilever waveguide resonant sensors shows high repeatability and accuracy, with a standard deviation as low as σ = 50 Hz (0.027%) for fresonant = 184.969 kHz. By performing focused-ion beam (FIB) milling on a sensor, a mass sensitivity of Δm/Δf = 5.3 × 10-15 g Hz-1 was measured, which is competitive with other sensors. Resonant frequencies as high as f = 1.061 MHz (Qeffective = 159.7) have been measured in air with calculated sensitivity Δm/Δf = 1.1 × 10-16 g Hz-1. Electrostatic tuning of the resonator sensors was also examined. The prospect of developing InP MEMS devices monolithically integrated with active optical components (lasers, LEDs, photodetectors) is discussed.

  13. Dynamics of self-organization of ramified patterns in an electromechanical system

    NASA Astrophysics Data System (ADS)

    Jun, Joseph

    We study the dynamcal self-organization of conducting particles into ramified tree networks when subjected to strong electric fields. We find that for a general class of initial configurations of particles that the trees grow in three stages: (I) strand formation, (II) boundary connection, and (III) geometric expansion. We show that graph theoretical measures like the average adjacency of particles clearly delineate the three growth stages. Additionally, we find that each particle becomes one of three species of particles, depending on the number of connections each particle makes with neighboring; this process occurs on a relatively short time scale. We find that the numbers of each kind of species is statistically robust across different experiments that have similar numbers of particles. We numerically explore the electrodynamic properties of the system, including the overall resistance; we find that this quantity scales non-linearly with the number of particles in the network. We qualitatively investigate the effects of the initial configuration of particles, and we find that the initial conditions strongly influence the final form of the networks, e.g. their topological structure. To understand how the geometrical arrangement of particles influences the steady-state topology of the system, we generate artificial trees using experimental data to seed our algorithms. By applying graph theory to the system, we attempt to predict the topological structure of the experimental trees. To accomplish this, we use three algorithms: (1) random, (2) minimal spanning, and (3) propagating front. We compare the results of the different algorithms and find that the minimal spanning tree algorithm reproduces the best match to the statistics of the experimental trees. In the experiments described above, we explore the dynamics of how tree structures self-organize in the system. We are also interested, more generally, in how the detailed structure of ramified patterns affects

  14. Micro-Electromechanical Instrument and Systems Development at the Charles Stark Draper Laboratory

    NASA Technical Reports Server (NTRS)

    Connelly, J. H.; Gilmore, J. P.; Weinberg, M. S.

    1995-01-01

    Several generations of micromechanical gyros and accelerometers have been developed at Draper. Current design effort centers on tuning-fork gyro design and pendulous accelerometer configurations. Over 200 gyros of different generations have been packaged and tested. These units have successfully performed across a temperature range of -40 to 85 degrees C, and have survived 30,000-g shock tests along all axes. Draper is currently under contract to develop an integrated micro-mechanical inertial sensor assembly (MMISA) and global positioning system (GPS) receiver configuration. The ultimate projections for size, weight, and power for an MMISA, after electronic design of the application specific integrated circuit (ASIC ) is completed, are 2 x 2 x 0.5 cm, 5 gm, and less than 1 W, respectively. This paper describes the fabrication process, the current gyro and accelerometer designs, and system configurations.

  15. Reliability of materials in MEMS : residual stress and adhesion in a micro power generation system.

    SciTech Connect

    Moody, Neville Reid; Kennedy, Marian S.; Bahr, David F.

    2007-09-01

    The reliability of thin film systems is important to the continued development of microelectronic and micro-electro-mechanical systems (MEMS). The reliability of these systems is often tied to the ability of the films to remain adhered to its substrate. By measuring the amount of energy to separate the film from the substrate, researchers can predicts film lifetimes. Recent work has resulted in several different testing techniques to measure this energy including spontaneous buckling, indentation induced delamination and four point bending. This report focuses on developing quantifiable adhesion measurements for multiple thin film systems used in MEMS and other thin film systems of interest to Sandia programs. First, methods of accurately assessing interfacial toughness using stressed overlayer methods are demonstrated using both the W/Si and Au/Si systems. For systems where fracture only occurs along the interface, such as Au/Si, the calculated fracture energies between different tests are identical if the energy put into the system is kept near the needed strain energy to cause delamination. When the energy in the system is greater than needed to cause delamination, calculated adhesion energies can increase by a factor of three due to plastic deformation. Dependence of calculated adhesion energies on applied energy in the system was also shown when comparisons of four point bending and stressed overlayer test methods were completed on Pt/Si systems. The fracture energies of Pt/Ti/SiO{sub 2} were studied using four-point bending and compressive overlayers. Varying the thickness of the Ti film from 2 to 17 nm in a Pt/Ti/SiO{sub 2} system, both test methods showed an increase of adhesion energy until the nominal Ti thickness was 12nm. Then the adhesion energy began to decrease. While the trends in toughness are similar, the magnitude of the toughness values measured between the test methods is not the same, demonstrating the difficulty in extracting mode I toughness

  16. Sandia MEMS

    2002-06-13

    SUMMiT V (Sandia Ultra planar Multi level MEMS Technology) is a 5 level surface micromachine fabrication technology, which customers intornal and external to Sandia can access to fabricate prototype MEMS devices. This CD contains an integrated set of electronic files that: a) Describe the SUMMiT V fabrication process b) Provide enabling educational information (including pictures, videos, technical information) c) Facilitate the process of designing MEMS with the SUMMiT process (prototype file, Design Rule Checker, Standardmore » Parts Library) d) Facilitate the process of having MEMS fabricated at Sandia National Laboratories e) Facilitate the process of having post-fabrication services performed. While there exist some files on the CD that are used in conjunction with software package AutoCAD, these files are not intended for use independent of the CD. Nole that the customer must purchase his/her own copy of Aut0CAD to use with these files.« less

  17. Fabrication of Diffractive Optical Elements for an Integrated Compact Optical-MEMS Laser Scanner

    SciTech Connect

    WENDT,JOEL R.; KRYGOWSKI,T.W.; VAWTER,GREGORY A.; SPAHN,OLGA B.; SWEATT,WILLIAM C.; WARREN,MIAL E.; REYES,DAVID NMN

    2000-07-13

    The authors describe the microfabrication of a multi-level diffractive optical element (DOE) onto a micro-electromechanical system (MEMS) as a key element in an integrated compact optical-MEMS laser scanner. The DOE is a four-level off-axis microlens fabricated onto a movable polysilicon shuttle. The microlens is patterned by electron beam lithography and etched by reactive ion beam etching. The DOE was fabricated on two generations of MEMS components. The first generation design uses a shuttle suspended on springs and displaced by a linear rack. The second generation design uses a shuttle guided by roller bearings and driven by a single reciprocating gear. Both the linear rack and the reciprocating gear are driven by a microengine assembly. The compact design is based on mounting the MEMS module and a vertical cavity surface emitting laser (VCSEL) onto a fused silica substrate that contains the rest of the optical system. The estimated scan range of the system is {+-}4{degree} with a spot size of 0.5 mm.

  18. Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics

    SciTech Connect

    Acheli, A. Serhane, R.

    2015-03-30

    This paper presents the studies of mechanical behavior of MEMS cantilever beam made of poly-silicon material, using the coupling of three application modes (plane strain, electrostatics and the moving mesh) of COMSOL Multi-physics software. The cantilevers playing a key role in Micro Electro-Mechanical Systems (MEMS) devices (switches, resonators, etc) working under potential shock. This is why they require actuation under predetermined conditions, such as electrostatic force or inertial force. In this paper, we present mechanical behavior of a cantilever actuated by an electrostatic force. In addition to the simplification of calculations, the weight of the cantilever was not taken into account. Different parameters like beam displacement, electrostatics force and stress over the beam have been calculated by finite element method after having defining the geometry, the material of the cantilever model (fixed at one of ends but is free to move otherwise) and his operational space.

  19. Real-time visualization of bridge structural response through wireless MEMS sensors

    NASA Astrophysics Data System (ADS)

    Chung, Hung-Chi; Enomoto, Tomoyuki; Loh, Kenneth; Shinozuka, Masanobu

    2004-07-01

    This study investigates the reliability and accuracy of wireless micro-electromechanical-system (MEMS)-type sensors in application of bridge structural vibration monitoring. With wireless capabilities added onto the developed sensors, it becomes unnecessary for engineers to connect enormous lengths of cables in order to measure vibration on bridges for instance. We investigated two types of MEMS accelerometers: the ADXL 202E and the Silicon Design 2210. To prove the validity of measuring acceleration by using these devices with wireless communication, we succeeded on measuring a pedestrian bridge's vibration under excitation loads in the center of span. The result had been compared with the traditional cabled sensor, PCB 393C. The wireless sensors were showed to be effective and much affordable to carry out the monitoring missions in situ.

  20. Ultrasonic Multiple-Access Ranging System Using Spread Spectrum and MEMS Technology for Indoor Localization

    PubMed Central

    Segers, Laurent; Tiete, Jelmer; Braeken, An; Touhafi, Abdellah

    2014-01-01

    Indoor localization of persons and objects poses a great engineering challenge. Previously developed localization systems demonstrate the use of wideband techniques in ultrasound ranging systems. Direct sequence and frequency hopping spread spectrum ultrasound signals have been proven to achieve a high level of accuracy. A novel ranging method using the frequency hopping spread spectrum with finite impulse response filtering will be investigated and compared against the direct sequence spread spectrum. In the first setup, distances are estimated in a single-access environment, while in the second setup, two senders and one receiver are used. During the experiments, the micro-electromechanical systems are used as ultrasonic sensors, while the senders were implemented using field programmable gate arrays. Results show that in a single-access environment, the direct sequence spread spectrum method offers slightly better accuracy and precision performance compared to the frequency hopping spread spectrum. When two senders are used, measurements point out that the frequency hopping spread spectrum is more robust to near-far effects than the direct sequence spread spectrum. PMID:24553084

  1. Atomistic and model description of nanotube electromechanical devices

    NASA Astrophysics Data System (ADS)

    Rotkin, Slava V.

    2003-03-01

    Nanotubes (NTs), which are natural objects on the size scale compatible with nanodevices and bio-molecules, exhibit several unique properties by themselves and in specific environments such as electronic, bio-chemical or electromechanical nanodevices. A compact continuum model has been developed [1] for the multi-scale calculation of NT behavior in various devices, ranging from Nano-Electromechanical Systems (NEMS)[2] to Light-Controlled Molecular Switches [3]. The continuum model parameterization is based on Molecular Dynamics and microscopic modeling. For example, elements of quantum mechanical consideration were introduced through the calculation of the nanotube polarizability, atomistic capacitance [4], and van der Waals interaction [5]. Quantum-chemistry approach was used for computation of an equilibrium structure of chemically modified NTs. An analytical expression will be discussed for quantum capacitance of metallic NTs with arbitrary lateral deformation. Compact model and a quantum mechanical simulation will be compared for the NT charge density calculation. A scattering probability for a potential of charged impurity and ballistic conductance of NT channel have been computed for a light controlled electronic NT switch. Analytical expression for the pull-in voltage for NT NEMS will be presented with quantum corrections and van der Waals interactions taken into account. This calculation will demonstrate that a principal physical limit exists for fabricating NEMS [6]. 1. N.R.Aluru, et.al., in Handbook of Nanoscience, Engineering and Technology, Eds: W.Goddard, et.al.; CRC Press, 2002 2. M.Dequesnes, S.V.Rotkin, N.R.Aluru, Nanotechnology 13, 2002 3. S.V.Rotkin, I.Zharov, Int.J.of Nanoscience 1(3/4) 2002 4. K.A.Bulashevich, S.V.Rotkin, JETPL 75(4) 2002 5. S.V.Rotkin, K.Hess, J.of Comp.Electronics 1(3) 2002 6. S.V.Rotkin, in Microfabr. Syst. and MEMS, Eds: P. J. Hesketh, et.al. ECS Inc., Pennington, NJ, USA 2002

  2. Triz in Mems

    NASA Astrophysics Data System (ADS)

    Apte, Prakash R.

    1999-11-01

    TRIZ is a Russian abbreviation. Genrich Altshuller developed it fifty years ago in the former Soviet Union. He examined thousands of inventions made in different technological systems and formulated a 'Theory of Inventive problem solving' (TRIZ). Altshuller's research of over fifty years on Creativity and Inventive Problem Solving has led to many different classifications, methods and tools of invention. Some of these are, Contradictions table, Level of inventions, Patterns in evolution of technological systems, ARIZ-Algorithm for Inventive Problem Solving, Diagnostic problem solving and Anticipatory Failure Determination. MEMS research consists of conceptual design, process technology and including of various Mechanical, ELectrical, Thermal, Magnetic, Acoustic and other effects. MEMS system s are now rapidly growing in complexity. Each system will thus follow one or more 'patterns of evolution' as given by Altshuller. This paper attempts to indicate how various TRIZ tools can be used in MEMS research activities.

  3. Micro space power system using MEMS fuel cell for nano-satellites

    NASA Astrophysics Data System (ADS)

    Lee, Jongkwang; Kim, Taegyu

    2014-08-01

    A micro space power system using micro fuel cell was developed for nano-satellites. The power system was fabricated using microelectromechanical system (MEMS) fabrication technologies. Polymer electrolyte membrane (PEM) fuel cell was selected in consideration of space environment. Sodium borohydride (NaBH4) was selected as a hydrogen source while hydrogen peroxide (H2O2) was selected as an oxygen source. The power system consists of a micro fuel cell, micro-reactor, micro-pump, and fuel cartridges. The micro fuel cell was fabricated on a light-weight and corrosion-resistant glass plates. The micro-reactor was used to generate hydrogen from NaBH4 alkaline solution via a catalytic hydrolysis reaction. All components such as micro-pump, fuel cartridges, and auxiliary battery were integrated for a complete power system. The storability of NaBH4 solution was evaluated at -25 °C and the performance of the micro power system was measured at various operating conditions. The power output of micro power system reasonably followed up the given electric load conditions.

  4. MEMS Reliability Assurance Guidelines for Space Applications

    NASA Technical Reports Server (NTRS)

    Stark, Brian (Editor)

    1999-01-01

    This guide is a reference for understanding the various aspects of microelectromechanical systems, or MEMS, with an emphasis on device reliability. Material properties, failure mechanisms, processing techniques, device structures, and packaging techniques common to MEMS are addressed in detail. Design and qualification methodologies provide the reader with the means to develop suitable qualification plans for the insertion of MEMS into the space environment.

  5. Concepts using optical MEMS array for ladar scene projection

    NASA Astrophysics Data System (ADS)

    Smith, J. Lynn

    2003-09-01

    Scene projection for HITL testing of LADAR seekers is unique because the 3rd dimension is time delay. Advancement in AFRL for electronic delay and pulse shaping circuits, VCSEL emitters, fiber optic and associated scene generation is underway, and technology hand-off to test facilities is expected eventually. However, size and cost currently projected behooves cost mitigation through further innovation in system design, incorporating new developments, cooperation, and leveraging of dual-purpose technology. Therefore a concept is offered which greatly reduces the number (thus cost) of pulse shaping circuits and enables the projector to be installed on the mobile arm of a flight motion simulator table without fiber optic cables. The concept calls for an optical MEMS (micro-electromechanical system) steerable micro-mirror array. IFOV"s are a cluster of four micro-mirrors, each of which steers through a unique angle to a selected light source with the appropriate delay and waveform basis. An array of such sources promotes angle-to-delay mapping. Separate pulse waveform basis circuits for each scene IFOV are not required because a single set of basis functions is broadcast to all MEMS elements simultaneously. Waveform delivery to spatial filtering and collimation optics is addressed by angular selection at the MEMS array. Emphasis is on technology in existence or under development by the government, its contractors and the telecommunications industry. Values for components are first assumed as those that are easily available. Concept adequacy and upgrades are then discussed. In conclusion an opto-mechanical scan option ranks as the best light source for near-term MEMS-based projector testing of both flash and scan LADAR seekers.

  6. MEMS Using SOI Substrate

    NASA Technical Reports Server (NTRS)

    Tang, Tony K.

    1999-01-01

    At NASA, the focus for smaller, less costly missions has given impetus for the development of microspacecraft. MicroElectroMechanical System (MEMS) technology advances in the area of sensor, propulsion systems, and instruments, make the notion of a specialized microspacecraft feasible in the immediate future. Similar to the micro-electronics revolution,the emerging MEMS technology offers the integration of recent advances in micromachining and nanofabrication techniques with microelectronics in a mass-producible format,is viewed as the next step in device and instrument miniaturization. MEMS technology offers the potential of enabling or enhancing NASA missions in a variety of ways. This new technology allows the miniaturization of components and systems, where the primary benefit is a reduction in size, mass and power. MEMS technology also provides new capabilities and enhanced performance, where the most significant impact is in performance, regardless of system size. Finally,with the availability of mass-produced, miniature MEMS instrumentation comes the opportunity to rethink our fundamental measurement paradigms. It is now possible to expand our horizons from a single instrument perspective to one involving multi-node distributed systems. In the distributed systems and missions, a new system in which the functionality is enabled through a multiplicity of elements. Further in the future, the integration of electronics, photonics, and micromechanical functionalities into "instruments-on-a-chip" will provide the ultimate size, cost, function, and performance advantage. In this presentation, I will discuss recent development, requirement, and applications of various MEMS technologies and devices for space applications.

  7. Advancing MEMS Technology Usage through the MUMPS (Multi-User MEMS Processes) Program

    NASA Technical Reports Server (NTRS)

    Koester, D. A.; Markus, K. W.; Dhuler, V.; Mahadevan, R.; Cowen, A.

    1995-01-01

    In order to help provide access to advanced micro-electro-mechanical systems (MEMS) technologies and lower the barriers for both industry and academia, the Microelectronic Center of North Carolina (MCNC) and ARPA have developed a program which provides users with access to both MEMS processes and advanced electronic integration techniques. The four distinct aspects of this program, the multi-user MEMS processes (MUMP's), the consolidated micro-mechanical element library, smart MEMS, and the MEMS technology network are described in this paper. MUMP's is an ARPA-supported program created to provide inexpensive access to MEMS technology in a multi-user environment. It is both a proof-of-concept and educational tool that aids in the development of MEMS in the domestic community. MUMP's technologies currently include a 3-layer poly-silicon surface micromachining process and LIGA (lithography, electroforming, and injection molding) processes that provide reasonable design flexibility within set guidelines. The consolidated micromechanical element library (CaMEL) is a library of active and passive MEMS structures that can be downloaded by the MEMS community via the internet. Smart MEMS is the development of advanced electronics integration techniques for MEMS through the application of flip chip technology. The MEMS technology network (TechNet) is a menu of standard substrates and MEMS fabrication processes that can be purchased and combined to create unique process flows. TechNet provides the MEMS community greater flexibility and enhanced technology accessibility.

  8. Guidelines for reliability testing of microelectromechanical systems in military applications

    NASA Astrophysics Data System (ADS)

    Mason, Robert; Gintert, Larry; Rippen, Marc; Skelton, Don; Zunino, James; Gutmanis, Ivars

    2006-01-01

    Micro electromechanical systems (MEMS) and microsystems technologies are seeing increased consideration for use in military applications. Assets ranging from aircraft and communications to munitions may soon employ MEMS. In all cases, MEMS devices must perform their required functions for the duration of the equipment's mission profile. Long-term performance in a given scenario can be assured through an understanding of the predominant MEMS failure modes. Once the failure modes have been identified, standardized tests will be developed and conducted on representative devices to detect the potential for these failures. Failure mechanisms for MEMS devices in severe environments may include wear and stiction. While corrosion is not usually a concern for commercial MEMS devices, as they are made primarily of silicon, other materials, including metallics, are being considered for MEMS to provide enhanced robustness in military applications. When these materials are exposed to aggressive military environments, corrosion may become a concern. Corrosion of metallic packaging and interconnect materials may also present issues for overall performance. Considering these corrosion and degradation issues, there is a need to implement standardized tests and requirements to ensure adequate long-term performance of MEMS devices in fielded and emerging military systems. To this end, Concurrent Technologies Corporation has been tasked by the U.S. Army to initiate efforts to standardize test methods that have been developed under previous activities. This paper presents an overview of the MEMS activities under the standardization effort and the MEMS reliability test guidelines that have been drafted as a first phase of this effort.

  9. Electromechanical flight control actuator

    NASA Technical Reports Server (NTRS)

    1979-01-01

    The feasibility of using an electromechanical actuator (EMA) as the primary flight control equipment in aerospace flight is examined. The EMA motor design is presented utilizing improved permanent magnet materials. The necessary equipment to complete a single channel EMA using the single channel power electronics breadboard is reported. The design and development of an improved rotor position sensor/tachometer is investigated.

  10. Electromechanical Technician Skills Questionnaire.

    ERIC Educational Resources Information Center

    Anoka-Hennepin Technical Coll., Minneapolis, MN.

    This document contains test items to measure the job skills of electromechanical technicians. Questions are organized in four sections that cover the following topics: (1) shop math; (2) electricity and electronics; (3) mechanics and machining; and (4) plumbing, heating, ventilation and air conditioning, and welding skills. Questions call for…

  11. Method and system for automated on-chip material and structural certification of MEMS devices

    DOEpatents

    Sinclair, Michael B.; DeBoer, Maarten P.; Smith, Norman F.; Jensen, Brian D.; Miller, Samuel L.

    2003-05-20

    A new approach toward MEMS quality control and materials characterization is provided by a combined test structure measurement and mechanical response modeling approach. Simple test structures are cofabricated with the MEMS devices being produced. These test structures are designed to isolate certain types of physical response, so that measurement of their behavior under applied stress can be easily interpreted as quality control and material properties information.

  12. MEMS Memory Elements

    NASA Technical Reports Server (NTRS)

    Carley, L. Richard; El-Sayed, Rany Tawfik; Guillou, David F.; Alfaro, Fernando; Fedder, Gary K.; Schlosser, Steven W.; Griffin, John L.; Nagle, David F.; Ganger, Gregory R.; Bain, James

    2001-01-01

    This paper presents a design example that illustrates the potential of microelectromechanical systems (MEMS) to perform the mechanical positioning required for addressing stored data and to enable an entirely new mechanism for reading and writing magnetic data. Specifically, MEMS sensors and actuators can be used to achieve active servo control of the separation between magnetic probe tips and a media surface with sub-nanometer accuracy. This allows mechanical position to be used to selectively write magnetic marks in a continuous thin-film magnetic media. In addition, MEMS sensors can be used to measure the separation between a magnetic probe tip and the media with a noise floor of roughly 22 picometers, allowing them to be used as position sensors in a magnetic force microscope (MFM) style data detection system.

  13. High performance MEMS accelerometers for concrete SHM applications and comparison with COTS accelerometers

    NASA Astrophysics Data System (ADS)

    Kavitha, S.; Joseph Daniel, R.; Sumangala, K.

    2016-01-01

    Accelerometers used for civil and huge mechanical structural health monitoring intend to measure the shift in the natural frequency of the monitored structures (<100 Hz) and such sensors should have large sensitivity and extremely low noise floor. Sensitivity of accelerometers is inversely proportional to the frequency squared. Commercial MEMS (Micro Electro-Mechanical System) accelerometers that are generally designed for large bandwidth (e.g 25 kHz in ADXL150) have poor sensor level sensitivity and therefore uses complex signal conditioning electronics to achieve large sensitivity and low noise floor which in turn results in higher cost. In this work, an attempt has been made to design MEMS capacitive and piezoresistive accelerometers for smaller bandwidth using IntelliSuite and CoventorWare MEMS tools respectively. The various performance metrics have been obtained using simulation experiments and the results show that these sensors have excellent voltage sensitivity, noise performance and high resolution at sensor level and are even superior to commercial MEMS accelerometers.

  14. Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems

    PubMed Central

    Kim, Jong-Wan; Takao, Hidekuni; Sawada, Kazuaki; Ishida, Makoto

    2007-01-01

    This paper presents the integration of an inductor by complementary metal-oxide-semiconductor (CMOS) compatible processes for integrated smart microsensor systems that have been developed to monitor the motion and vital signs of humans in various environments. Integration of radio frequency transmitter (RF) technology with complementary metal-oxide-semiconductor/micro electro mechanical systems (CMOS/MEMS) microsensors is required to realize the wireless smart microsensors system. The essential RF components such as a voltage controlled RF-CMOS oscillator (VCO), spiral inductors for an LC resonator and an integrated antenna have been fabricated and evaluated experimentally. The fabricated RF transmitter and integrated antenna were packaged with subminiature series A (SMA) connectors, respectively. For the impedance (50 Ω) matching, a bonding wire type inductor was developed. In this paper, the design and fabrication of the bonding wire inductor for impedance matching is described. Integrated techniques for the RF transmitter by CMOS compatible processes have been successfully developed. After matching by inserting the bonding wire inductor between the on-chip integrated antenna and the VCO output, the measured emission power at distance of 5 m from RF transmitter was -37 dBm (0.2 μW).

  15. Design of a MEMS-based retina scanning system for biometric authentication

    NASA Astrophysics Data System (ADS)

    Woittennek, Franziska; Knobbe, Jens; Pügner, Tino; Schelinski, Uwe; Grüger, Heinrich

    2014-05-01

    There is an increasing need for reliable authentication for a number of applications such as e commerce. Common authentication methods based on ownership (ID card) or knowledge factors (password, PIN) are often prone to manipulations and may therefore be not safe enough. Various inherence factor based methods like fingerprint, retinal pattern or voice identifications are considered more secure. Retina scanning in particular offers both low false rejection rate (FRR) and low false acceptance rate (FAR) with about one in a million. Images of the retina with its characteristic pattern of blood vessels can be made with either a fundus camera or laser scanning methods. The present work describes the optical design of a new compact retina laser scanner which is based on MEMS (Micro Electric Mechanical System) technology. The use of a dual axis micro scanning mirror for laser beam deflection enables a more compact and robust design compared to classical systems. The scanner exhibits a full field of view of 10° which corresponds to an area of 4 mm2 on the retinal surface surrounding the optical disc. The system works in the near infrared and is designed for use under ambient light conditions, which implies a pupil diameter of 1.5 mm. Furthermore it features a long eye relief of 30 mm so that it can be conveniently used by persons wearing glasses. The optical design requirements and the optical performance are discussed in terms of spot diagrams and ray fan plots.

  16. MEMS Actuated Deformable Mirror

    SciTech Connect

    Papavasiliou, A; Olivier, S; Barbee, T; Walton, C; Cohn, M

    2005-11-10

    This ongoing work concerns the creation of a deformable mirror by the integration of MEMS actuators with Nanolaminate foils through metal compression boning. These mirrors will use the advantages of these disparate technologies to achieve dense actuation of a high-quality, continuous mirror surface. They will enable advanced adaptive optics systems in large terrestrial telescopes. While MEMS actuators provide very dense actuation with high precision they can not provide large forces typically necessary to deform conventional mirror surfaces. Nanolaminate foils can be fabricated with very high surface quality while their extraordinary mechanical properties enable very thin, flexible foils to survive the rigors of fabrication. Precise metal compression bonding allows the attachment of the fragile MEMS actuators to the thin nanolaminate foils without creating distortions at the bond sites. This paper will describe work in four major areas: (1) modeling and design, (2) bonding development, (3) nanolaminate foil development, (4) producing a prototype. A first-principles analytical model was created and used to determine the design parameters. A method of bonding was determined that is both strong, and minimizes the localized deformation or print through. Work has also been done to produce nanolaminate foils that are sufficiently thin, flexible and flat to be deformed by the MEMS actuators. Finally a prototype was produced by bonding thin, flexible nanolaminate foils to commercially available MEMS actuators.

  17. Review of polymer MEMS micromachining

    NASA Astrophysics Data System (ADS)

    Kim, Brian J.; Meng, Ellis

    2016-01-01

    The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potentially more cost effective manufacturing options to produce highly flexible structures and substrates with tailorable bulk and surface properties. As a broad review of the progress of polymers within MEMS, major and recent developments in polymer micromachining are presented here, including deposition, removal, and release techniques for three widely used MEMS polymer materials, namely SU-8, polyimide, and Parylene C. The application of these techniques to create devices having flexible substrates and novel polymer structural elements for biomedical MEMS (bioMEMS) is also reviewed.

  18. MEMS Calculator

    National Institute of Standards and Technology Data Gateway

    SRD 166 MEMS Calculator (Web, free access)   This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.

  19. Pedestrian mobile mapping system for indoor environments based on MEMS IMU and range camera

    NASA Astrophysics Data System (ADS)

    Haala, N.; Fritsch, D.; Peter, M.; Khosravani, A. M.

    2011-12-01

    This paper describes an approach for the modeling of building interiors based on a mobile device, which integrates modules for pedestrian navigation and low-cost 3D data collection. Personal navigation is realized by a foot mounted low cost MEMS IMU, while 3D data capture for subsequent indoor modeling uses a low cost range camera, which was originally developed for gaming applications. Both steps, navigation and modeling, are supported by additional information as provided from the automatic interpretation of evacuation plans. Such emergency plans are compulsory for public buildings in a number of countries. They consist of an approximate floor plan, the current position and escape routes. Additionally, semantic information like stairs, elevators or the floor number is available. After the user has captured an image of such a floor plan, this information is made explicit again by an automatic raster-to-vector-conversion. The resulting coarse indoor model then provides constraints at stairs or building walls, which restrict the potential movement of the user. This information is then used to support pedestrian navigation by eliminating drift effects of the used low-cost sensor system. The approximate indoor building model additionally provides a priori information during subsequent indoor modeling. Within this process, the low cost range camera Kinect is used for the collection of multiple 3D point clouds, which are aligned by a suitable matching step and then further analyzed to refine the coarse building model.

  20. MRI contrast using solid-state, B1-distorting, microelectromechanical systems (MEMS) microresonant devices (MRDs).

    PubMed

    Ciocan, Razvan; Lenkinski, Robert E; Bernstein, Jonathan; Bancu, Mirela; Marquis, Robert; Ivanishev, Alex; Kourtelidis, Fotini; Matsui, Aya; Borenstein, Jeffrey; Frangioni, John V

    2009-04-01

    Presently, signal generation in MRI depends on the concentration and relaxivity of protons or other MR-active nuclei, and contrast depends on local differences in signal. In this proof-of-principle study, we explore the use of nonchemical, solid-state devices for generating detectable signal and/or contrast in vitro and in vivo. We introduce the concept of microresonant devices (MRDs), which are micron-sized resonators fabricated using microelectromechanical systems (MEMS) technology. Fifteen-micrometer (15-microm)-thick, coil MRDs were designed to resonate at the 3T Larmor frequency of protons (127.7 MHz) and were fabricated using tantalum (Ta) oxide thin-film capacitors and copper-plated spiral inductors. The performance of MRDs having final diameters of 300, 500, and 1000 microm were characterized in saline using a radio frequency (RF) scanning microscope and a clinical 3T MR scanner. The measured B(1) fields of 300 microm to 1000 microm MRDs ranged from 3.25 microT to 3.98 microT, and their quality factors (Q) ranged from 3.9 to 7.2. When implanted subcutaneously in the flank of a mouse, only MRDs tuned to the resonant frequency of protons generated a measurable in vivo B(1) field. This study lays the foundation for a new class of solid-state contrast agents for MRI.

  1. Electromechanics of graphene spirals

    SciTech Connect

    Korhonen, Topi; Koskinen, Pekka

    2014-12-15

    Among the most fascinating nanostructure morphologies are spirals, hybrids of somewhat obscure topology and dimensionality with technologically attractive properties. Here, we investigate mechanical and electromechanical properties of graphene spirals upon elongation by using density-functional tight-binding, continuum elasticity theory, and classical force field molecular dynamics. It turns out that electronic properties are governed by interlayer interactions as opposed to strain effects. The structural behavior is governed by van der Waals interaction: in its absence spirals unfold with equidistant layer spacings, ripple formation at spiral perimeter, and steadily increasing axial force; in its presence, on the contrary, spirals unfold via smooth local peeling, complex geometries, and nearly constant axial force. These electromechanical trends ought to provide useful guidelines not only for additional theoretical investigations but also for forthcoming experiments on graphene spirals.

  2. A scoping review of studies comparing the medication event monitoring system (MEMS) with alternative methods for measuring medication adherence.

    PubMed

    El Alili, Mohamed; Vrijens, Bernard; Demonceau, Jenny; Evers, Silvia M; Hiligsmann, Mickael

    2016-07-01

    Different methods are available for measuring medication adherence. In this paper, we conducted a scoping review to identify and summarize evidence of all studies comparing the Medication Event Monitoring System (MEMS) with alternative methods for measuring medication adherence. A literature search was performed using the open database www.iAdherence.org that includes all original studies reporting findings from the MEMS. Papers comparing methods for measuring adherence to solid oral formulations were included. Data was extracted using a standardized extraction table. A total of 117 articles fulfilled the inclusion criteria, including 251 comparisons. Most frequent comparisons were against self-report (n = 119) and pill count (n = 59). Similar outcome measures were used in 210 comparisons (84%), among which 78 used dichotomous variables (adherent or not) and 132 used continuous measures (adherence expressed as percentage). Furthermore, 32% of all comparisons did not estimate adherence over the same coverage period and 44% of all comparisons did not use a statistical method or used a suboptimal one. Only eighty-seven (35%) comparisons had similar coverage periods, similar outcome measures and optimal statistical methods. Compared to MEMS, median adherence was grossly overestimated by 17% using self-report, by 8% using pill count and by 6% using rating. In conclusion, among all comparisons of MEMS versus alternative methods for measuring adherence, only a few used adequate comparisons in terms of outcome measures, coverage periods and statistical method. Researchers should therefore use stronger methodological frameworks when comparing measurement methods and be aware that non-electronic measures could lead to overestimation of medication adherence. PMID:27005306

  3. A scoping review of studies comparing the medication event monitoring system (MEMS) with alternative methods for measuring medication adherence.

    PubMed

    El Alili, Mohamed; Vrijens, Bernard; Demonceau, Jenny; Evers, Silvia M; Hiligsmann, Mickael

    2016-07-01

    Different methods are available for measuring medication adherence. In this paper, we conducted a scoping review to identify and summarize evidence of all studies comparing the Medication Event Monitoring System (MEMS) with alternative methods for measuring medication adherence. A literature search was performed using the open database www.iAdherence.org that includes all original studies reporting findings from the MEMS. Papers comparing methods for measuring adherence to solid oral formulations were included. Data was extracted using a standardized extraction table. A total of 117 articles fulfilled the inclusion criteria, including 251 comparisons. Most frequent comparisons were against self-report (n = 119) and pill count (n = 59). Similar outcome measures were used in 210 comparisons (84%), among which 78 used dichotomous variables (adherent or not) and 132 used continuous measures (adherence expressed as percentage). Furthermore, 32% of all comparisons did not estimate adherence over the same coverage period and 44% of all comparisons did not use a statistical method or used a suboptimal one. Only eighty-seven (35%) comparisons had similar coverage periods, similar outcome measures and optimal statistical methods. Compared to MEMS, median adherence was grossly overestimated by 17% using self-report, by 8% using pill count and by 6% using rating. In conclusion, among all comparisons of MEMS versus alternative methods for measuring adherence, only a few used adequate comparisons in terms of outcome measures, coverage periods and statistical method. Researchers should therefore use stronger methodological frameworks when comparing measurement methods and be aware that non-electronic measures could lead to overestimation of medication adherence.

  4. Performance assessment of bio-inspired systems: flow sensing MEMS hairs.

    PubMed

    Droogendijk, H; Casas, J; Steinmann, T; Krijnen, G J M

    2015-01-01

    Despite vigorous growth in biomimetic design, the performance of man-made devices relative to their natural templates is still seldom quantified, a procedure which would however significantly increase the rigour of the biomimetic approach. We applied the ubiquitous engineering concept of a figure of merit (FoM) to MEMS flow sensors inspired by cricket filiform hairs. A well known mechanical model of a hair is refined and tailored to this task. Five criteria of varying importance in the biological and engineering fields are computed: responsivity, power transfer, power efficiency, response time and detection threshold. We selected the metrics response time and detection threshold for building the FoM to capture the performance in a single number. Crickets outperform actual MEMS on all criteria for a large range of flow frequencies. Our approach enables us to propose several improvements for MEMS hair-sensor design.

  5. Elevation scanning laser/multi-sensor hazard detection system controller and mirror/mast speed control components. [roving vehicle electromechanical devices

    NASA Technical Reports Server (NTRS)

    Craig, J.; Yerazunis, S. W.

    1978-01-01

    The electro-mechanical and electronic systems involved with pointing a laser beam from a roving vehicle along a desired vector are described. A rotating 8 sided mirror, driven by a phase-locked dc motor servo system, and monitored by a precision optical shaft encoder is used. This upper assembly is then rotated about an orthogonal axis to allow scanning into all 360 deg around the vehicle. This axis is also driven by a phase locked dc motor servo-system, and monitored with an optical shaft encoder. The electronics are realized in standard TTL integrated circuits with UV-erasable proms used to store desired coordinates of laser fire. Related topics such as the interface to the existing test vehicle are discussed.

  6. Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors.

    PubMed

    Tosolini, G; Villanueva, L G; Perez-Murano, F; Bausells, J

    2012-01-01

    Validation of a technological process requires an intensive characterization of the performance of the resulting devices, circuits, or systems. The technology for the fabrication of micro and nanoelectromechanical systems (MEMS and NEMS) is evolving rapidly, with new kind of device concepts for applications like sensing or harvesting are being proposed and demonstrated. However, the characterization tools and methods for these new devices are still not fully developed. Here, we present an on-wafer, highly precise, and rapid characterization method to measure the mechanical, electrical, and electromechanical properties of piezoresistive cantilevers. The setup is based on a combination of probe-card and atomic force microscopy technology, it allows accessing many devices across a wafer and it can be applied to a broad range of MEMS and NEMS. Using this setup we have characterized the performance of multiple submicron thick piezoresistive cantilever force sensors. For the best design we have obtained a force sensitivity Re(F) = 158μV/nN, a noise of 5.8 μV (1 Hz-1 kHz) and a minimum detectable force of 37 pN with a relative standard deviation of σ(r) ≈ 8%. This small value of σ(r), together with a high fabrication yield >95%, validates our fabrication technology. These devices are intended to be used as bio-molecular detectors for the measurement of intermolecular forces between ligand and receptor molecule pairs.

  7. A MEMS torsion magnetic sensor with reflective blazed grating integration

    NASA Astrophysics Data System (ADS)

    Long, Liang; Zhong, Shaolong

    2016-07-01

    A novel magnetic sensor based on a permanent magnet and blazed grating is presented in this paper. The magnetic field is detected by measuring the diffracted wavelength of the blazed grating which is changed by the torsion motion of a torsion sensitive micro-electromechanical system (MEMS) structure with a permanent magnet attached. A V-shape grating structure is obtained by wet etching on a (1 0 0) SOI substrate. When the magnet is magnetized in different directions, the in-plane or out-of-plane magnetic field is detected by a sensor. The MEMS magnetic sensor with a permanent magnet is fabricated after analytical design and bulk micromachining processes. The magnetic-sensing capability of the sensor is tested by fiber-optic detection system. The result shows the sensitivities of the in-plane and out-of-plane magnetic fields are 3.6 pm μT‑1 and 5.7 pm μT‑1, respectively. Due to utilization of the permanent magnet and fiber-optic detection, the sensor shows excellent capability of covering the high-resolution detection of low-frequency signals. In addition, the sensitive direction of the magnetic sensor can be easily switched by varying the magnetized direction of the permanent magnet, which offers a simple way to achieve tri-axis magnetic sensor application.

  8. A MEMS torsion magnetic sensor with reflective blazed grating integration

    NASA Astrophysics Data System (ADS)

    Long, Liang; Zhong, Shaolong

    2016-07-01

    A novel magnetic sensor based on a permanent magnet and blazed grating is presented in this paper. The magnetic field is detected by measuring the diffracted wavelength of the blazed grating which is changed by the torsion motion of a torsion sensitive micro-electromechanical system (MEMS) structure with a permanent magnet attached. A V-shape grating structure is obtained by wet etching on a (1 0 0) SOI substrate. When the magnet is magnetized in different directions, the in-plane or out-of-plane magnetic field is detected by a sensor. The MEMS magnetic sensor with a permanent magnet is fabricated after analytical design and bulk micromachining processes. The magnetic-sensing capability of the sensor is tested by fiber-optic detection system. The result shows the sensitivities of the in-plane and out-of-plane magnetic fields are 3.6 pm μT-1 and 5.7 pm μT-1, respectively. Due to utilization of the permanent magnet and fiber-optic detection, the sensor shows excellent capability of covering the high-resolution detection of low-frequency signals. In addition, the sensitive direction of the magnetic sensor can be easily switched by varying the magnetized direction of the permanent magnet, which offers a simple way to achieve tri-axis magnetic sensor application.

  9. Development of blood extraction system designed by female mosquito's blood sampling mechanism for bio-MEMS

    NASA Astrophysics Data System (ADS)

    Tsuchiya, Kazuyoshi; Nakanishi, Naoyuki; Nakamachi, Eiji

    2005-02-01

    A compact and wearable wristwatch type Bio-MEMS such as a health monitoring system (HMS) to detect blood sugar level for diabetic patient, was newly developed. The HMS consists of (1) a indentation unit with a microneedle to generate the skin penetration force using a shape memory alloy(SMA) actuator, (2) a pumping unit using a bimorph PZT piezoelectric actuator to extract the blood and (3) a gold (Au) electrode as a biosensor immobilized GOx and attached to the gate electrode of MOSFET to detect the amount of Glucose in extracted blood. GOx was immobilized on a self assembled spacer combined with an Au electrode by the cross-link method using BSA as an additional bonding material. The device can extract blood in a few microliter through a painless microneedle with the negative pressure by deflection of the bimorph PZT piezoelectric actuator produced in the blood chamber, by the similar way the female mosquito extracts human blood with muscle motion to flex or relax. The performances of the liquid sampling ability of the pumping unit through a microneedle (3.8mm length, 100μm internal diameter) using the bimorph PZT piezoelectric microactuator were measured. The blood extraction micro device could extract human blood at the speed of 2μl/min, and it is enough volume to measure a glucose level, compared to the amount of commercial based glucose level monitor. The electrode embedded in the blood extraction device chamber could detect electrons generated by the hydrolysis of hydrogen peroxide produced by the reaction between GOx and glucose in a few microliter extracted blood, using the constant electric current measurement system of the MOSFET type hybrid biosensor. The output voltage for the glucose diluted in the chamber was increased lineally with increase of the glucose concentration.

  10. Organic plasma process for simple and substrate-independent surface modification of polymeric BioMEMS devices.

    PubMed

    Hiratsuka, Atsunori; Muguruma, Hitoshi; Lee, Kyong-Hoon; Karube, Isao

    2004-07-15

    A polymeric bio micro electromechanical systems (BioMEMS) device was fabricated using organic plasma polymerization, by which the surface of a polymeric substrate could easily be modified through vapor-phase deposition of organic thin films. This technique, capable of polymeric deposition of any kind of monomer, can serve the purpose of anti-fouling coating, wettability control, or layer-to-layer interface creation, on the surface of any given chemically-inert polymeric substrate without involving cumbersome surface organic reactions. A prototype device was fabricated to have an array of electrochemical glucose biosensors with the three electrode configuration, each of which has a microfluidic channel (500 microm x 800 microm) for capillary-action-driven sample delivery and the concerned enzymatic reaction. Stressing the advantages of the plasma polymerization process using a polymeric substrate together with some additional features accomplished in our device fabrication, new possibilities in the field of polymeric BioMEMS are discussed.

  11. Critical dimension: MEMS road map

    NASA Astrophysics Data System (ADS)

    Poulingue, Marc; Knutrud, Paul

    2007-03-01

    The use of Micro-Electro-Mechanical Systems (MEMS) technology in mechanical, biotechnology, optical, communications, and ink jet is growing. Critical dimensions in MEMS devices are getting smaller and processes are constantly facing new metrology challenges. This paper will examine some critical dimension metrology needs and challenges for MEMS using resist-on-silicon structures. It is shown that the use of automated optical CD metrology can meet emerging measurement requirements while bringing the advantages of a non-destructive, high throughput and precise methodology.

  12. Miniaturized GPS/MEMS IMU integrated board

    NASA Technical Reports Server (NTRS)

    Lin, Ching-Fang (Inventor)

    2012-01-01

    This invention documents the efforts on the research and development of a miniaturized GPS/MEMS IMU integrated navigation system. A miniaturized GPS/MEMS IMU integrated navigation system is presented; Laser Dynamic Range Imager (LDRI) based alignment algorithm for space applications is discussed. Two navigation cameras are also included to measure the range and range rate which can be integrated into the GPS/MEMS IMU system to enhance the navigation solution.

  13. European MEMS foundries

    NASA Astrophysics Data System (ADS)

    Salomon, Patric R.

    2003-01-01

    According to the latest release of the NEXUS market study, the market for MEMS or Microsystems Technology (MST) is predicted to grow to $68B by the year 2005, with systems containing these components generating even higher revenues and growth. The latest advances in MST/MEMS technology have enabled the design of a new generation of microsystems that are smaller, cheaper, more reliable, and consume less power. These integrated systems bring together numerous analog/mixed signal microelectronics blocks and MEMS functions on a single chip or on two or more chips assembled within an integrated package. In spite of all these advances in technology and manufacturing, a system manufacturer either faces a substantial up-front R&D investment to create his own infrastructure and expertise, or he can use design and foundry services to get the initial product into the marketplace fast and with an affordable investment. Once he has a viable product, he can still think about his own manufacturing efforts and investments to obtain an optimized high volume manufacturing for the specific product. One of the barriers to successful exploitation of MEMS/MST technology has been the lack of access to industrial foundries capable of producing certified microsystems devices in commercial quantities, including packaging and test. This paper discusses Multi-project wafer (MPW) runs, requirements for foundries and gives some examples of foundry business models. Furthermore, this paper will give an overview on MST/MEMS services that are available in Europe, including pure commercial activities, European project activities (e.g. Europractice), and some academic services.

  14. MEMS digital camera

    NASA Astrophysics Data System (ADS)

    Gutierrez, R. C.; Tang, T. K.; Calvet, R.; Fossum, E. R.

    2007-02-01

    MEMS technology uses photolithography and etching of silicon wafers to enable mechanical structures with less than 1 μm tolerance, important for the miniaturization of imaging systems. In this paper, we present the first silicon MEMS digital auto-focus camera for use in cell phones with a focus range of 10 cm to infinity. At the heart of the new silicon MEMS digital camera, a simple and low-cost electromagnetic actuator impels a silicon MEMS motion control stage on which a lens is mounted. The silicon stage ensures precise alignment of the lens with respect to the imager, and enables precision motion of the lens over a range of 300 μm with < 5 μm hysteresis and < 2 μm repeatability. Settling time is < 15 ms for 200 μm step, and < 5ms for 20 μm step enabling AF within 0.36 sec at 30 fps. The precise motion allows COTS optics to maintain MTF > 0.8 at 20 cy/mm up to 80% field over the full range of motion. Accelerated lifetime testing has shown that the alignment and precision of motion is maintained after 8,000 g shocks, thermal cycling from - 40 C to 85 C, and operation over 20 million cycles.

  15. MEMS-based biosensors for environmental monitoring

    NASA Astrophysics Data System (ADS)

    Endo, Tatsuro; Morita, Yasutaka; Tamiya, Eiichi

    2004-03-01

    Biosensors in connection with enzyme linked immunosorbent assay (ELISA) can be applied in many fields of research. In this paper, the reduction in the size of ELISA utilizing micro-chemical reaction is described in a microchamber array chip, and also a micro-flow antibody chip. The chips were fabricated by micro electromechanical system (MEMS) technology. The quantitative determination of dioxins was performed by using the chips. Glass or polystyrene beads were used for immobilization of an antibody at these chips. The antibody-immobilized beads were introduced into micro-flow channel or microchamber. As a competitive ELISA, sample solution mixed with horseradish peroxidase (HRP)-conjugated antigen, and non-HRP conjugated antigen was allowed to react in the microchamber or flow channel. As a sandwich assay, sample solution and HRP-conjugated antibody were sequentially added to the chamber. After the antigen-antibody reaction, addition of PBS buffer, hydrogen peroxide, and fluorogenic substrate produced the fluorescent dye. The resulting change in the fluorescence intensity was monitored by a fluorescence microscope.

  16. Electromechanical Limits of Polymersomes

    NASA Astrophysics Data System (ADS)

    Aranda-Espinoza, H.; Bermudez, H.; Bates, F. S.; Discher, D. E.

    2001-11-01

    Self-assembled membranes of amphiphilic diblock copolymers enable comparisons of cohesiveness with lipid membranes over the range of hydrophobic thicknesses d = 3-15 nm. At zero mechanical tension the breakdown potential Vc for polymersomes with d = 15 nm is 9 V, compared to 1 V for liposomes with d = 3 nm. Nonetheless, electromechanical stresses at breakdown universally exhibit a V2c dependence, and membrane capacitance shows the expected strong d dependence, conforming to simple thermodynamic models. The viscous nature of the diblock membranes is apparent in the protracted postporation dynamics.

  17. Experimental investigations of creep in gold RF-MEMS microstructures

    NASA Astrophysics Data System (ADS)

    Somà, Aurelio; De Pasquale, Giorgio; Saleem, Muhammad Mubasher

    2015-05-01

    Lifetime prediction and reliability evaluation of micro-electro-mechanical systems (MEMS) are influenced by permanent deformations caused by plastic strain induced by creep. Creep in microstructures becomes critical in those applications where permanent loads persist for long times and thermal heating induces temperature increasing respect to the ambient. Main goal of this paper is to investigate the creep mechanism in RF-MEMS microstructures by means of experiments. This is done firstly through the detection of permanent deformation of specimens and, then, by measuring the variation of electro-mechanical parameters (resonance frequency, pull-in voltage) that provide indirect evaluation of mechanical stiffness alteration from creep. To prevent the errors caused be cumulative heating of samples and dimensional tolerances, three specimens with the same nominal geometry have been tested per each combination of actuation voltage and temperature. Results demonstrated the presence of plastic deformation due to creep, combined with a component of reversible strain linked to the viscoelastic behavior of the material.

  18. Fabrication processes for MEMS deformable mirrors in the next generation telescope instruments

    NASA Astrophysics Data System (ADS)

    Diouf, Alioune

    This dissertation advances three critical technology areas at the frontier of research for micro electro-mechanical systems (MEMS) deformable minors (DMs) needed for next generation telescopes (NGTs). High actuator-count MEMS deformable minors are needed for future ground-based large astronomical telescopes. Scaling up the current MEMS DMs to unprecedented numbers of independent actuators---up to 10,000 on a single DM---will require new electrical connection architecture for the actuators in order to replace the wire-bonded scheme that has been used to date. A through-wafer via interconnection fabrication process for MEMS DMs is developed to offer a path to transform the frontier of high actuator count MEMS micromirrors. In a class of NGTs instrument known as the Multi-Object Adaptive Optics (MOAO), the correction made by the DM of the wavefront phase error over the entire telescope field view is not accessible to the sensing unit. To achieve compensation, precise, single step "open-loop" commands must be developed for the DM. Due to the nonlinear relationship between applied voltage and actuation displacement at each actuator, and the mechanical coupling among actuators through the mirror membrane, such open-loop control is a formidable task. A combination of mirror surface modeling and sparse actuator empirical calibration is used to demonstrate open-loop control of MEMS deformable minors to the accuracy of closed-loop control over the entire available DM stroke. Shapes at the limit of achievable minor spatial frequencies with up to 2.5microm amplitudes have been achieved within 20nm RMS error accuracy of closed-loop control. The calibration of a single actuator to be used for predicting shapes results in an additional 14nm RMS surface error compared to parallel calibration of all actuators in the deformable minor. The ubiquitous reflective coatings for MEMS deformable minors are gold and aluminum. Emerging adaptive optics application require broadband optical

  19. Design and fabrication of a sensor integrated MEMS/NANO-skin system for human physiological response measurement

    NASA Astrophysics Data System (ADS)

    Leng, Hongjie; Lin, Yingzi

    2010-04-01

    Human state in human-machine systems highly affects the system performance, and should be monitored. Physiological cues are more suitable for monitoring the human state in human-machine system. This study was focused on developing a new sensing system, i.e. NANO-Skin, to non-intrusively measure physiological cues from human-machine contact surfaces for human state recognition. The first part was to analyze the relation between human state and physiological cues. Generally, heart rate, skin conductance, skin temperature, operating force, blood alcohol concentration, sweat rate, and electromyography have close relation with human state, and can be measured from human skin. The second part was to compare common sensors, MEMS sensors, and NANO sensors. It was found that MEMS sensors and NANO sensors can offer unique contributions to the development of NANO-Skin. The third part was to discuss the design and manufacture of NANO-Skin. The NANO-Skin involves five components, the flexible substrate, sensors, special integrated circuit, interconnection between sensors and special integrated circuit, and protection layer. Experiments were performed to verify the measurement accuracy of NANO-Skin. It is feasible to use NANO-Skins to non-intrusively measure physiological cues from human-machine contact surfaces for human state recognition.

  20. High-speed and large-scale electromagnetically actuated MEMS scanning-mirror

    NASA Astrophysics Data System (ADS)

    Mu, Canjun; Zhang, Feiling; Wu, Yaming

    2008-03-01

    Large-scale micro-electromechanical systems (MEMS) scanning mirrors play a primary role in many fields of manipulating light beam scanning, such as rapid optical spectrum analyzers (OSAs) based on dispersive gratings using in near infrared (NIR) region. According to the applications, a high speed electromagnetically actuated MEMS scanning mirror with large mirror area of 9×6mm2 has been developed. The MEMS scanning mirror chip, which is fabricated using bulk silicon micromachining process and electroplating technique, is immersed in a constant 365 mT magnetic field parallel to the coil plane and generates the maximum optical deflection angle of +/-11.15° at the 1.39 kHz resonant frequency. The quality factor, Q, of 77 is achieved in air corresponding to a low power consumption of 102.6 mW. In addition, the surface roughness of less than 20nm for scanning mirror has been measured and the optical reflectivity at the wavelength of 1550nm is high up to 87%. The results show that the device is adequate for mm-sized scanning systems and compatible with smart OSAs applications.

  1. Remote heart function monitoring: role of the CardioMEMS HF System.

    PubMed

    Vanoli, Emilio; D'Elia, Emilia; La Rovere, Maria T; Gronda, Edoardo

    2016-07-01

    Heart failure is a pandemic condition that is challenging cardiology today. The primary economical and social burden of this syndrome is hospitalization rate whose costs represent the highest ones within the entire healthcare management. Remote monitoring of physiological data, obtained through self-reporting via telephone calls or, automatically, using external devices is a potential novel approach to implement management of patients with heart failure and reduce hospitalization rates. Relatively large but, sometimes, contradicting information exists about the efficacy of remote monitoring via different noninvasive approaches to reduce the economical and social burden of heart failure management. This leaves still partly unaddressed this critical issue and generates the need for new approaches. In this context, the CardioMEMS device that can chronically monitor pulmonary pressures from a small microchip inserted transvenously in the pulmonary artery seems to represent an innovative tool to challenge hospitalization rates. Consecutive analyses from the CHAMPION study had indeed documented the efficacy of the CardioMEMS in the remote monitoring of the pulmonary circulation status of patients with heart failure and in providing adequate information to optimally manage such patients with the final result of a significant hospitalization rate reduction. The striking information here is that this appears to be true in patients with preserved left ventricular ejection fraction also. Overall, the reports from the CHAMPION study encourage the use of CardioMEMS but larger populations are needed to definitively prove its value. PMID:26881785

  2. Electromechanical flight control actuator, volume 2

    NASA Technical Reports Server (NTRS)

    1978-01-01

    Schematic diagrams are given for both the four-channel electromechanical actuator and the single-channel power electronics breadboard. Detailed design data is also given on the gears used in the differential gearbox and a copy of the operations manual for the system is included. Performance test results are given for the EMA motor and its current source indicator, the drive control electronics, and the overall system. The power converter waveform test results are also summarized.

  3. Temperature drift modeling of MEMS gyroscope based on genetic-Elman neural network

    NASA Astrophysics Data System (ADS)

    Chong, Shen; Rui, Song; Jie, Li; Xiaoming, Zhang; Jun, Tang; Yunbo, Shi; Jun, Liu; Huiliang, Cao

    2016-05-01

    In order to improve the temperature drift modeling precision of a tuning fork micro-electromechanical system (MEMS) gyroscope, a novel multiple inputs/single output model based on genetic algorithm (GA) and Elman neural network (Elman NN) is proposed. First, the temperature experiment of MEMS gyroscope is carried out and the outputs of MEMS gyroscope and temperature sensors are collected; then the temperature drift model based on temperature, temperature variation rate and the coupling term is proposed, and the Elman NN is employed to guarantee the generalization ability of the model; at last the genetic algorithm is used to tune the parameters of Elman NN in order to improve the modeling precision. The Allan analysis results validate that, compared to traditional single input/single output model, the novel multiple inputs/single output model can guarantee high accurate fitting ability because the proposed model can provide more plentiful controllable information. By the way, the generalization ability of the Elman neural network can be improved significantly due to the parameters are optimized by genetic algorithm.

  4. MEMS/MOEMS application to optical communication

    NASA Astrophysics Data System (ADS)

    Fujita, Hiroyuki

    2001-09-01

    The paper describes brief summary of current MEMS technology and its application to optics. The optical application is one of the most important applications of MEMS because of two reasons; one is that the micromachine technology can provide high performances and new functionalities for optical systems and the other is that those optical microsystems can satisfy market demands for optical communication networks, displays, data storage and sensors. Opportunities for MEMS-based devices in optical communication networks are discussed. Some specific examples of MEMS optical switches are described.

  5. Analysis, fabrication and testing of a MEMS-based micropropulsion system

    NASA Astrophysics Data System (ADS)

    Bayt, Robert Louis, Jr.

    seconds. However, the reduction in Reynolds number with increased chamber temperature causes viscous dissipation to increase and thruster efficiencies to decline. The efficiencies vary with Reynolds number in the same fashion as their unheated counterparts, which confirms that Reynolds number is the governing similarity parameter. The thruster was operated at a temperature of 420°C, and demonstrated an Isp of 83 seconds. This represents an Isp efficiency of 79% for an 8.25:1 area ratio nozzle. These results suggest that MEMS-based micropropulsion systems offer higher performance at lower mass, when operated at Reynolds numbers above 2500 for both heated and unheated thrusters. (Copies available exclusively from MIT Libraries, Rm. 14-0551, Cambridge, MA 02139-4307. Ph. 617-253-5668; Fax 617-253-1690.)

  6. Light Intensity Fibre Optic Sensor for MEMS displacement and vibration metrology

    NASA Astrophysics Data System (ADS)

    Orłowska, Karolina; Słupski, Piotr; Świątkowski, Michał; Kunicki, Piotr; Sankowska, Anna; Gotszalk, Teodor

    2015-01-01

    Micro- and Electro-Mechanical Systems (MEMS) form a group of transducers used for very precise mass sensing (in the range of femtograms) and force detection (in the range of piconewtons) changes. These can be read by the resonant frequency shift or amplitude of mechanical vibration changes. Monitoring of optical path is one of the ways in which this detection can occur. The use of fibre construction makes the read-out system even more attractive. There are two popular types of Fibre Optics Displacement Sensors (FODS). The first - with amplitude of optical wave modulation - intensity sensors. The second - with phase modulation - fibre optics interferometers. In this paper Intensity Fibre Optic Displacement Sensor (I-FODS) for MEMS displacement metrology has been presented. A system formed by simple optical fibre optics, light source and photodetector had been tested and evaluated in order to obtain the highest possible sensitivity and resolution, using low-cost standard telecommunications equipment. The sensor's system is dedicated to MEMS amplitude of vibrations metrology and allows displacement monitoring in the range up to 400 μm with the resolution of 15 nm and the sensitivity of 0.19 V/nm for a mirror reflecting surface. The paper shows Quartz Tuning Fork (QTF) as an example of the MEMS with a very rough surface and its resonance frequency is equal to about 32 kHz. The designed I-FODS allows the QTF amplitude measurements with the resolution of 92 nm and the sensitivity of 0.017 mV/nm.

  7. Passive magnetic bearings for vehicular electromechanical batteries

    SciTech Connect

    Post, R

    1996-03-01

    This report describes the design of a passive magnetic bearing system to be used in electromechanical batteries (flywheel energy storage modules) suitable for vehicular use. One or two such EMB modules might, for example, be employed in a hybrid-electric automobile, providing efficient means for power peaking, i.e., for handling acceleration and regenerative braking power demands at high power levels. The bearing design described herein will be based on a ''dual-mode'' operating regime.

  8. Electromechanical x-ray generator

    DOEpatents

    Watson, Scott A; Platts, David; Sorensen, Eric B

    2016-05-03

    An electro-mechanical x-ray generator configured to obtain high-energy operation with favorable energy-weight scaling. The electro-mechanical x-ray generator may include a pair of capacitor plates. The capacitor plates may be charged to a predefined voltage and may be separated to generate higher voltages on the order of hundreds of kV in the AK gap. The high voltage may be generated in a vacuum tube.

  9. Meteoroid Engineering Model (MEM)A Meteoroid Model for the Inner Solar System

    NASA Technical Reports Server (NTRS)

    McNamara, H.; Jones, J.; Kaufman, B.; Suggs, R.; Cook, W.; Smith, S.

    2004-01-01

    In an attempt to overcome some of the deficiencies of existing meteoroid models, NASA's Space Environments and Effects Program sponsored a three year research effort at the University of Western Ontario. The resulting understanding of the sporadic meteoroid environment - particularly the nature and distribution of the sporadic sources - was then incorporated into a new meteoroid environment model (MEM) by members of the Space Environments Team at NASA's Marshall Space Flight Center. This paper discusses some of the revolutionary aspects of MEM which include: a) identification of the sporadic radiants with real sources of meteoroids, such as comets, b) a physics-based approach which yields accurate fluxes and directionality for interplanetary spacecraft anywhere from .2 AU to 2 AU, and c) velocity distributions obtained from theory and validated against observation. Use of the model, which gives penetrating fluxes and average impact speeds on the surfaces of a cube-like structure are also described, along with its current limitations and plans for future improvements.

  10. Meteoroid Engineering Model (MEM): A Meteoroid Model for the Inner Solar System

    NASA Technical Reports Server (NTRS)

    McNamara, Heather A.; Jones, Jim; Kauffman, Billy; Suggs, Robert; Cooke, William; Smith, Steven

    2004-01-01

    In an attempt to overcome some of the deficiencies of existing meteoroid models, NASA's Space Environments and Effects (SEE) Program sponsored a three year research effort at the University of Western Ontario. The resulting understanding of the sporadic meteoroid environment - particularly the nature and distribution of the sporadic sources - were then incorporated into a new Meteoroid Engineering Model (MEM) by members of the Space Environments Team at NASA s Marshall Space Flight Center. This paper discusses some of the revolutionary aspects of MEM which include a) identification of the sporadic radiants with real sources of meteoroids, such as comets, b) a physics-based approach which yields accurate fluxes and directionality for interplanetary spacecraft anywhere from 0.2 astronomical units (AU) to 2 AU, and c) velocity distributions obtained from theory and validated against observation. Use of the model, which gives penetrating fluxes and average impact speeds on the surfaces of a cube-like structure, is also described along with its current limitations and plans for future improvements.

  11. Applications of ferrofluids in Micro Electro Mechanical Systems (MEMS) and micropumps

    NASA Astrophysics Data System (ADS)

    Jain, V. K.; Pant, R. P.; Vinod Kumar, .

    2008-12-01

    The micro-pump is one of the most promising micro-flow devices. At micro-level electronically controlled pumping of any fluid by a mechanical pump is not so easy and reliable. In the realm of nano-tech materials, ferrofluids have unique properties in both liquids and solids and have potential applications for MEMS/NEMS devices. This paper presents two new types of concepts, a micro-flowmeter based on a micro-turbine made using MEMS technology and the other is a micro-pump based on ferrofluidic actuation. In our first device an optical photovoltaic sensor has also been integrated with this device, and the micro-turbine rotates with a speed of 50000 rpm. We have fabricated a ferrofluid-based glass micro-pump of size 20 × 20 × 10 mm^{3}, in which micro actuation is electrically controlled by NdFeB (N50) permanent magnets (diameter 5 × 3 mm, B_{r} = 1400 mT, coercive field H_c=840 ,kA/m) with a ferrofluid bearing. The device is able to pump the fluid at the rate of 10 μ L/actuation. Figs 3, Refs 19.

  12. MEMS Rate Sensors for Space

    NASA Technical Reports Server (NTRS)

    Gambino, Joel

    2000-01-01

    Micromachined Electro Mechanical System (MEMS) Rate Sensors are an enabling technology for Nanosatellites. The recent award of a Nanosatellite program to the Goddard Space Flight Center (GSFC) underscores the urgency of the development of these systems for space use. The Guidance Navigation and Control Center (GNCC) at the GSFC is involved in several efforts to develop this technology. The GNCC seeks to improve the performance of these sensors and develop flight ready systems for spacecraft use by partnering with industry leaders in MEMS Rate Sensor development. This paper introduces Microgyros and discusses the efforts in progress at the GNCC to improve the performance of these units and develop MEMS Rate Sensors for space use.

  13. Wafer scale interdigitated nanoelectrode devices functionalized using a MEMS-based deposition system

    NASA Astrophysics Data System (ADS)

    Martinez-Rivas, A.; Carcenac, F.; Saya, D.; Séverac, C.; Nicu, L.; Vieu, C.

    2012-03-01

    This paper reports on a methodology to elaborate interdigitated nanoelectrode devices (INDs) at the wafer scale, relying on a mix-and-match process which combines proximity optical lithography and electron beam lithography. An optimum exposure dose allowed fabricating nanodevices, at the wafer level, with a successful yield of 97%. The final devices are bonded onto conventional TO-8 packages. Electrical characterization in a short-circuited nanoelectrode is performed, revealing a 230 µΩ cm resistivity value at 23 °C. A MEMS-based spotter made of cantilevers (called Bioplume) has been used to obtain precise functionalization of the INDs with sub-picoliter volume solutions. These INDs are the basis of multiple tunnel junction nanodevices, intended to serve as novel highly sensitive nanobiosensors.

  14. Challenges in the Packaging of MEMS

    SciTech Connect

    Malshe, A.P.; Singh, S.B.; Eaton, W.P.; O'Neal, C.; Brown, W.D.; Miller, W.M.

    1999-03-26

    The packaging of Micro-Electro-Mechanical Systems (MEMS) is a field of great importance to anyone using or manufacturing sensors, consumer products, or military applications. Currently much work has been done in the design and fabrication of MEMS devices but insufficient research and few publications have been completed on the packaging of these devices. This is despite the fact that packaging is a very large percentage of the total cost of MEMS devices. The main difference between IC packaging and MEMS packaging is that MEMS packaging is almost always application specific and greatly affected by its environment and packaging techniques such as die handling, die attach processes, and lid sealing. Many of these aspects are directly related to the materials used in the packaging processes. MEMS devices that are functional in wafer form can be rendered inoperable after packaging. MEMS dies must be handled only from the chip sides so features on the top surface are not damaged. This eliminates most current die pick-and-place fixtures. Die attach materials are key to MEMS packaging. Using hard die attach solders can create high stresses in the MEMS devices, which can affect their operation greatly. Low-stress epoxies can be high-outgassing, which can also affect device performance. Also, a low modulus die attach can allow the die to move during ultrasonic wirebonding resulting to low wirebond strength. Another source of residual stress is the lid sealing process. Most MEMS based sensors and devices require a hermetically sealed package. This can be done by parallel seam welding the package lid, but at the cost of further induced stress on the die. Another issue of MEMS packaging is the media compatibility of the packaged device. MEMS unlike ICS often interface with their environment, which could be high pressure or corrosive. The main conclusion we can draw about MEMS packaging is that the package affects the performance and reliability of the MEMS devices. There is a

  15. On-Chip Micro-Electro-Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing.

    PubMed

    Erfan, Mazen; Sabry, Yasser M; Sakr, Mohammad; Mortada, Bassem; Medhat, Mostafa; Khalil, Diaa

    2016-05-01

    In this work, we study the detection of acetylene (C2H2), carbon dioxide (CO2) and water vapor (H2O) gases in the near-infrared (NIR) range using an on-chip silicon micro-electro-mechanical system (MEMS) Fourier transform infrared (FT-IR) spectrometer in the wavelength range 1300-2500 nm (4000-7692 cm(-1)). The spectrometer core engine is a scanning Michelson interferometer micro-fabricated using a deep-etching technology producing self-aligned components. The light is free-space propagating in-plane with respect to the silicon chip substrate. The moving mirror of the interferometer is driven by a relatively large stroke electrostatic comb-drive actuator corresponding to about 30 cm(-1) resolution. Multi-mode optical fibers are used to connect light between the wideband light source, the interferometer, the 10 cm gas cell, and the optical detector. A wide dynamic range of gas concentration down to 2000 parts per million (ppm) in only 10 cm length gas cell is demonstrated. Extending the wavelength range to the mid-infrared (MIR) range up to 4200 nm (2380 cm(-1)) is also experimentally demonstrated, for the first time, using a bulk micro-machined on-chip MEMS FT-IR spectrometer. The obtained results open the door for an on-chip optical gas sensor for many applications including environmental sensing and industrial process control in the NIR/MIR spectral ranges.

  16. Double-Layer Mediated Electromechanical Response of Amyloid Fibrils in Liquid Environment

    SciTech Connect

    Nikiforov, Maxim; Thompson, G. L.; Reukov, Vladimir V; Jesse, Stephen; Guo, Senli; Rodriguez, Brian; Seal, Katyayani; Vertegel, Alexey; Kalinin, Sergei V

    2010-01-01

    Harnessing electrical bias-induced mechanical motion on the nanometer and molecular scale is a critical step toward understanding the fundamental mechanisms of redox processes and implementation of molecular electromechanical machines. Probing these phenomena in biomolecular systems requires electromechanical measurements be performed in liquid environments. Here we demonstrate the use of band excitation piezoresponse force microscopy for probing electromechanical coupling in amyloid fibrils. The approaches for separating the elastic and electromechanical contributions based on functional fits and multivariate statistical analysis are presented. We demonstrate that in the bulk of the fibril the electromechanical response is dominated by double-layer effects (consistent with shear piezoelectricity of biomolecules), while a number of electromechanically active hot spots possibly related to structural defects are observed.

  17. The Oral Fluid MEMS/NEMS Chip (OFMNC): diagnostic and translational applications.

    PubMed

    Li, Y; Denny, P; Ho, C-M; Montemagno, C; Shi, W; Qi, F; Wu, B; Wolinsky, L; Wong, D T

    2005-06-01

    The ability to monitor health status, disease onset and progression, and treatment outcome through non-invasive means is a most desirable goal in health-care promotion and delivery. There are three prerequisites for this goal to be realized: specific biomarkers associated with a health or disease state, a non-invasive approach to detect and monitor the biomarkers, and the technologies to discriminate between and among the biomarkers. We present a roadmap to achieve these goals using oral fluids as the diagnostic medium to scrutinize the health and/or disease status of individuals. This is an ideal opportunity to bridge state-of-the-art micro-/nano-electromechanical system (MEMS/NEMS) sensors to oral fluid for diagnostic applications. As the "mirror of body", oral fluid is a perfect medium to be explored for health and disease surveillance. The translational applications and opportunities are enormous. PMID:16000263

  18. Piezoelectric cantilevers energy harvesting in MEMS technique

    NASA Astrophysics Data System (ADS)

    Shang, Yingqi; Qiu, Chengjun; Liu, Hongmei; Chen, Xiaojie; Qu, Wei; Dou, Yanwei

    2011-11-01

    Piezoelectric cantilevers energy harvesting made by micro-electromechanical system (MEMS) technology can scavenge power from low-level ambient vibration sources. The developed cantilevers energy harvesting are featured with resonate frequency and power output in microwatt level, which is sufficient to the self-supportive sensors for in-service integrity monitoring of large social and environmental infrastructures at remote locations. In this paper, piezoelectric energy harvesting based on thick-film piezoelectric cantilevers is investigated to resonate at specific frequencies of an external vibration energy source, which creating electrical energy via the piezoelectric effect. Our cantilever device has a multiple structure with a proof mass added to the end. The thick film lead zirconate titanate Pb(Zr,Ti)O3 (PZT) coated on the top of Au/Cr/SiO2/Si substrates by sol-gel-spin method. The thickness of the PZT membrane was up to 2μm and the cantilevers substrates thickness 50μm, wideness 1.5mm, length 4mm. The Au/Ti top electrode is patterned on top of the sol-gel-spin coated PZT thick film in order to employ the d31 mode. The prototype energy generator has a measured performance of 0.74μW effective electrical power, and 4.93 DC output voltages to resistance load. The effect of proof mass, beam shape and damping on the power generating performance are modeled to provide a design guideline for maximum power harvesting from environmentally available low frequency vibrations. A multiple structure cantilever is designed to achieve compactness, low resonant frequency and minimum damping coefficient, simultaneously. This device is promising to support networks of ultra-low-power sensor.

  19. Piezoelectric cantilevers energy harvesting in MEMS technique

    NASA Astrophysics Data System (ADS)

    Shang, Yingqi; Qiu, Chengjun; Liu, Hongmei; Chen, Xiaojie; Qu, Wei; Dou, Yanwei

    2012-04-01

    Piezoelectric cantilevers energy harvesting made by micro-electromechanical system (MEMS) technology can scavenge power from low-level ambient vibration sources. The developed cantilevers energy harvesting are featured with resonate frequency and power output in microwatt level, which is sufficient to the self-supportive sensors for in-service integrity monitoring of large social and environmental infrastructures at remote locations. In this paper, piezoelectric energy harvesting based on thick-film piezoelectric cantilevers is investigated to resonate at specific frequencies of an external vibration energy source, which creating electrical energy via the piezoelectric effect. Our cantilever device has a multiple structure with a proof mass added to the end. The thick film lead zirconate titanate Pb(Zr,Ti)O3 (PZT) coated on the top of Au/Cr/SiO2/Si substrates by sol-gel-spin method. The thickness of the PZT membrane was up to 2μm and the cantilevers substrates thickness 50μm, wideness 1.5mm, length 4mm. The Au/Ti top electrode is patterned on top of the sol-gel-spin coated PZT thick film in order to employ the d31 mode. The prototype energy generator has a measured performance of 0.74μW effective electrical power, and 4.93 DC output voltages to resistance load. The effect of proof mass, beam shape and damping on the power generating performance are modeled to provide a design guideline for maximum power harvesting from environmentally available low frequency vibrations. A multiple structure cantilever is designed to achieve compactness, low resonant frequency and minimum damping coefficient, simultaneously. This device is promising to support networks of ultra-low-power sensor.

  20. Giant piezoelectricity on Si for hyper-active MEMS

    NASA Astrophysics Data System (ADS)

    Eom, Chang-Beom

    2011-03-01

    Smart materials that can sense, manipulate, and position are crucial to the functionality of micro- and nano-machines. Integration of single crystal piezoelectric films on silicon offers the opportunity of high performance piezoelectric microelectromechanical systems (MEMS) incorporating all the advantages of large scale integration on silicon substrates with on-board electronic circuits, improving performance and eliminating common failure points associated with heterogeneous integration. We have fabricated oxide heterostructures with the highest piezoelectric coefficients and figure of merit for piezoelectric energy harvesting system ever realized on silicon substrates by synthesizing epitaxial thin films of Pb(Mg 1/3 Nb 2/3) O3 - PbTi O3 (PMN-PT) on vicinal (001) Si wafers using an epitaxial (001) SrTi O3 template layer. We have also demonstrated fabrication of PMN-PT cantilevers, whose mechanical behavior is consistent with theoretical calculations using the material constants of a bulk PMN-PT single crystal. These epitaxial heterostructures with giant piezoelectricity can be used for MEMS or NEMS devices that function with low drive voltage such as transducers for ultrasound medical imaging, micro-fluidic control and energy harvesting. Beyond electromechanical devices, our approach will open a new avenue to tune and modulate the properties of other multifunctional materials by dynamic strain control. This work was done in collaboration with S. H. Baek, J. Park, D. M. Kim, V. Aksyuk, R. R. Das, S. D. Bu, D. A. Felker, J. Lettieri, V. Vaithyanathan, S. S. N. Bharadwaja, N. Bassiri-Gharb, Y. B. Chen, H. P. Sun, H. W. Jang, D. J. Kreft, S. K. Streiffer, R. Ramesh, X. Q. Pan, S. Trolier-McKinstry, D. G. Schlom, M. S. Rzchowski, R. Blick. This work was supported by the National Science Foundation through grants ECCS-0708759.

  1. Differentially piezoresistive transduction of high-Q encapsulated SOI-MEMS resonators with sub-100 nm gaps.

    PubMed

    Li, Cheng-Syun; Li, Ming-Huang; Li, Sheng-Shian

    2015-01-01

    A differentially piezoresistive (piezo-R) readout proposed for single-crystal-silicon (SCS) microelectromechanical systems (MEMS) resonators is implemented in a foundrybased resonator platform, demonstrating effective feedthrough cancellation using just simple piezoresistors from the resonator supports while maximizing their capacitively transduced driving areas. The SCS resonators are fabricated by a CMOS foundry using an SOI-MEMS technology together with a polysilicon refill process. A high electromechanical coupling coefficient is attained by the use of 50-nm transducer gap spacing. Moreover, a vacuum package of the fabricated resonators is carried out through wafer-level bonding process. In this work, the corner supporting beams of the resonator serve not only mechanical supports but also piezoresistors for detecting the motional signal, hence substantially simplifying the overall resonator design to realize the piezo-R sensing. In addition, the fabricated resonators are capable of either capacitive sensing or piezo-R detection under the same capacitive drive. To mitigate feedthrough signals from parasitics, a differential measurement configuration of the piezo-R transduction is implemented in this work, featuring more than 30-dB improvement on the feedthrough level as compared with the single-ended piezo-R counterpart and purely capacitive sensing readout. Furthermore, the high-Q design of the mechanical supports is also investigated, offering Q more than 10 000 with efficient piezo-R transduction for MEMS resonators.

  2. Differentially piezoresistive transduction of high-Q encapsulated SOI-MEMS resonators with sub-100 nm gaps.

    PubMed

    Li, Cheng-Syun; Li, Ming-Huang; Li, Sheng-Shian

    2015-01-01

    A differentially piezoresistive (piezo-R) readout proposed for single-crystal-silicon (SCS) microelectromechanical systems (MEMS) resonators is implemented in a foundrybased resonator platform, demonstrating effective feedthrough cancellation using just simple piezoresistors from the resonator supports while maximizing their capacitively transduced driving areas. The SCS resonators are fabricated by a CMOS foundry using an SOI-MEMS technology together with a polysilicon refill process. A high electromechanical coupling coefficient is attained by the use of 50-nm transducer gap spacing. Moreover, a vacuum package of the fabricated resonators is carried out through wafer-level bonding process. In this work, the corner supporting beams of the resonator serve not only mechanical supports but also piezoresistors for detecting the motional signal, hence substantially simplifying the overall resonator design to realize the piezo-R sensing. In addition, the fabricated resonators are capable of either capacitive sensing or piezo-R detection under the same capacitive drive. To mitigate feedthrough signals from parasitics, a differential measurement configuration of the piezo-R transduction is implemented in this work, featuring more than 30-dB improvement on the feedthrough level as compared with the single-ended piezo-R counterpart and purely capacitive sensing readout. Furthermore, the high-Q design of the mechanical supports is also investigated, offering Q more than 10 000 with efficient piezo-R transduction for MEMS resonators. PMID:25585404

  3. Using a Floating-Gate MOS Transistor as a Transducer in a MEMS Gas Sensing System

    PubMed Central

    Barranca, Mario Alfredo Reyes; Mendoza-Acevedo, Salvador; Flores-Nava, Luis M.; Avila-García, Alejandro; Vazquez-Acosta, E. N.; Moreno-Cadenas, José Antonio; Casados-Cruz, Gaspar

    2010-01-01

    Floating-gate MOS transistors have been widely used in diverse analog and digital applications. One of these is as a charge sensitive device in sensors for pH measurement in solutions or using gates with metals like Pd or Pt for hydrogen sensing. Efforts are being made to monolithically integrate sensors together with controlling and signal processing electronics using standard technologies. This can be achieved with the demonstrated compatibility between available CMOS technology and MEMS technology. In this paper an in-depth analysis is done regarding the reliability of floating-gate MOS transistors when charge produced by a chemical reaction between metallic oxide thin films with either reducing or oxidizing gases is present. These chemical reactions need temperatures around 200 °C or higher to take place, so thermal insulation of the sensing area must be assured for appropriate operation of the electronics at room temperature. The operation principle of the proposal here presented is confirmed by connecting the gate of a conventional MOS transistor in series with a Fe2O3 layer. It is shown that an electrochemical potential is present on the ferrite layer when reacting with propane. PMID:22163478

  4. Scene-based nonuniformity correction algorithm for MEMS-based un-cooled IR image system

    NASA Astrophysics Data System (ADS)

    Dong, Liquan; Liu, Xiaohua; Zhao, Yuejin; Hui, Mei; Zhou, Xiaoxiao

    2009-08-01

    Almost two years after the investors in Sarcon Microsystems pulled the plug, the micro-cantilever array based uncooled IR detector technology is again attracting more and more attention because of its low cost and high credibility. An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial microcantilever structures that bend in response to thermal change. The IR images of objects obtained by these FPAs are readout by an optical method. For the IR images, one of the most problems of FPN is complicated by the fact that the response of each FPA detector changes due to a variety of factors, causing the nonuniformity pattern to slowly drift in time. Thus, it is required to remove the nonuniformity. A scene-based nonuniformity correction algorithm was discussed in this paper, against to the traditional calibration-based and other scene-based techniques, which has the better correct performance; better MSE compared with traditional methods can be obtained. Great compute and analysis have been realized by using the discussed algorithm to the simulated data and real infrared scene data respectively. The experimental results demonstrate, the corrected image by this algorithm not only yields highest Peak Signal-to-Noise Ratio values (PSNR), but also achieves best visual quality.

  5. Using a floating-gate MOS transistor as a transducer in a MEMS gas sensing system.

    PubMed

    Barranca, Mario Alfredo Reyes; Mendoza-Acevedo, Salvador; Flores-Nava, Luis M; Avila-García, Alejandro; Vazquez-Acosta, E N; Moreno-Cadenas, José Antonio; Casados-Cruz, Gaspar

    2010-01-01

    Floating-gate MOS transistors have been widely used in diverse analog and digital applications. One of these is as a charge sensitive device in sensors for pH measurement in solutions or using gates with metals like Pd or Pt for hydrogen sensing. Efforts are being made to monolithically integrate sensors together with controlling and signal processing electronics using standard technologies. This can be achieved with the demonstrated compatibility between available CMOS technology and MEMS technology. In this paper an in-depth analysis is done regarding the reliability of floating-gate MOS transistors when charge produced by a chemical reaction between metallic oxide thin films with either reducing or oxidizing gases is present. These chemical reactions need temperatures around 200 °C or higher to take place, so thermal insulation of the sensing area must be assured for appropriate operation of the electronics at room temperature. The operation principle of the proposal here presented is confirmed by connecting the gate of a conventional MOS transistor in series with a Fe(2)O(3) layer. It is shown that an electrochemical potential is present on the ferrite layer when reacting with propane.

  6. Gabor-domain optical coherence microscopy with integrated dual-axis MEMS scanner for fast 3D imaging and metrology

    NASA Astrophysics Data System (ADS)

    Canavesi, Cristina; Cogliati, Andrea; Hayes, Adam; Santhanam, Anand P.; Tankam, Patrice; Rolland, Jannick P.

    2015-10-01

    Fast, robust, nondestructive 3D imaging is needed for characterization of microscopic structures in industrial and clinical applications. A custom micro-electromechanical system (MEMS)-based 2D scanner system was developed to achieve 55 kHz A-scan acquisition in a Gabor-domain optical coherence microscopy (GD-OCM) instrument with a novel multilevel GPU architecture for high-speed imaging. GD-OCM yields high-definition volumetric imaging with dynamic depth of focusing through a bio-inspired liquid lens-based microscope design, which has no moving parts and is suitable for use in a manufacturing setting or in a medical environment. A dual-axis MEMS mirror was chosen to replace two single-axis galvanometer mirrors; as a result, the astigmatism caused by the mismatch between the optical pupil and the scanning location was eliminated and a 12x reduction in volume of the scanning system was achieved. Imaging at an invariant resolution of 2 μm was demonstrated throughout a volume of 1 × 1 × 0.6 mm3, acquired in less than 2 minutes. The MEMS-based scanner resulted in improved image quality, increased robustness and lighter weight of the system - all factors that are critical for on-field deployment. A custom integrated feedback system consisting of a laser diode and a position-sensing detector was developed to investigate the impact of the resonant frequency of the MEMS and the driving signal of the scanner on the movement of the mirror. Results on the metrology of manufactured materials and characterization of tissue samples with GD-OCM are presented.

  7. Electro-mechanical analogies for modeling the structural impedance response

    NASA Astrophysics Data System (ADS)

    Zagrai, Andrei

    2007-04-01

    Electro-mechanical (E/M) impedance is a powerful structural identification and health monitoring (SHM) technique that allows for inferring high-frequency structural dynamic characteristics directly by interrogating a network of embedded piezoelectric active sensors. In recent years, there has been a considerable interest in expanding range of applications of the electromechanical impedance technique, its synergistic integration into complementary SHM methodologies, and miniaturizing the associated impedance measurement circuitry. The present work is aimed at developing an E/M impedance modeling approach that explores analogies between electrical and mechanical systems and permits representation of the mechanical system elements in terms of equivalent electrical circuits. The advantage of such a representation is that analytical modeling is substantially simplified by considering a network of electrical elements, mechanical quantities are incorporated directly into the electrical model of a measurement unit, and modern circuit design, simulation and analysis software tools can be employed to improve the method performance. The electro-mechanical model of a piezoelectric impedance sensor is discussed and development of the electrical circuit representation of the sensor-structure interaction is presented. The proposed electrical and existing mechanical models are compared showing a good agreement. Applicability of the developed modeling approach is discussed and examples of numerical calculations are provided. It is suggested that describing a sensor-structure electro-mechanical system in terms of electro-mechanical analogies could simplify analytical modeling and improve instrumentation design.

  8. A Theoretical and Experimental Comparison of 3-3 and 3-1 Mode Piezoelectric Microelectromechanical Systems (MEMS)

    PubMed Central

    Kim, Donghwan; Hewa-Kasakarage, Nishshanka; Hall, Neal A.

    2014-01-01

    Two piezoelectric transducer modes applied in microelectromechanical systems are (i) the 3-1 mode with parallel electrodes perpendicular to a vertical polarization vector, and (ii) the 3-3 mode which uses interdigitated (IDT) electrodes to realize an in-plane polarization vector. This study compares the two configurations by deriving a Norton equivalent representation of each approach – including expressions for output charge and device capacitance. The model is verified using a microfabricated device comprised of multiple epitaxial silicon beams with sol-gel deposited lead zirconate titanate at the surface. The beams have identical dimensions and are attached to a common moving element at their tip. The only difference between beams is electrode configuration – enabling a direct comparison. Capacitance and charge measurements verify the presented theory with high accuracy. The Norton equivalent representation is general and enables comparison of any figure of merit, including electromechanical coupling coefficient and signal to noise ratio. With respect to coupling coefficient, the experimentally validated theory in this work suggests that 3-3 mode IDT-electrode configurations offer the potential for modest improvements compared against 3-1 mode devices (less than 2×), and the only geometrical parameter affecting this ratio is the fill factor of the IDT electrode. PMID:25309041

  9. Efforts in developing design and simulation tools for MEMS: DS/MEMS and CA/MEMS

    NASA Astrophysics Data System (ADS)

    Youn, Sung Kie; Kwak, Byung M.; Kwon, Jang-Hyuk; Chang, Su-Young; Huh, Jae S.; Kim, Eugene

    2002-04-01

    In this work, multi-physics simulation software (CA/MEMS) and design-optimization software (DS/MEMS) tailored for MEMS devices are introduced. The CA/MEMS, which is a simulation engine for DS/MEMS, is a 3-D multi-physics analysis code utilizing various numerical methods such as FEM, BEM and FVM to efficiently model MEMS application problems. The current CA/MEMS includes analysis- modules for structural, thermal, electric, electromagnetic and fluidic fields and is capable of the analyses of various coupled- field problems for MEMS applications. DS/MEMS is design optimization engine for MEMS devices. With integrating CA/MEMS and pre/post processor into CAD environment, DS/MEMS is organized to work in parametric CAD platform. DS/MEMS consists of optimal design module and robust design module. The optimal design module provides users three methods nonlinear programming, Taguchi parameter design and the response surface method. The robust design module, which is specially developed for MEMS application, can be used to minimize the perturbation of performances of MEMS devices under uncertainties of MEMS devices, such as process tolerance and the change of operating environments. To verify the efficiency and accuracy of CA/MEMS and the practical usefulness of DS/MEMS, we have been comparing the simulated results of CA/MEMS with those of other commercial codes and experimental data of manufactured MEMS devices, and investigating the performances of the optimized designs through DS/MEMS.

  10. MEMS AO for Planet Finding

    NASA Technical Reports Server (NTRS)

    Rao, Shanti; Wallace, J. Kent; Shao, Mike; Schmidtlin, Edouard; Levine, B. Martin; Samuele, Rocco; Lane, Benjamin; Chakrabarti, Supriya; Cook, Timothy; Hicks, Brian; Jung, Paul

    2008-01-01

    This slide presentation reviews a method for planet finding using microelectromechanical systems (MEMS) Adaptive Optics (AO). The use of a deformable mirror (DM) is described as a part of the instrument that was designed with a nulling interferometer. The strategy that is used is described in detail.

  11. CMOS compatible fabrication process of MEMS resonator for timing reference and sensing application

    NASA Astrophysics Data System (ADS)

    Huynh, Duc H.; Nguyen, Phuong D.; Nguyen, Thanh C.; Skafidas, Stan; Evans, Robin

    2015-12-01

    Frequency reference and timing control devices are ubiquitous in electronic applications. There is at least one resonator required for each of this device. Currently electromechanical resonators such as crystal resonator, ceramic resonator are the ultimate choices. This tendency will probably keep going for many more years. However, current market demands for small size, low power consumption, cheap and reliable products, has divulged many limitations of this type of resonators. They cannot be integrated into standard CMOS (Complement metaloxide- semiconductor) IC (Integrated Circuit) due to material and fabrication process incompatibility. Currently, these devices are off-chip and they require external circuitries to interface with the ICs. This configuration significantly increases the overall size and cost of the entire electronic system. In addition, extra external connection, especially at high frequency, will potentially create negative impacts on the performance of the entire system due to signal degradation and parasitic effects. Furthermore, due to off-chip packaging nature, these devices are quite expensive, particularly for high frequency and high quality factor devices. To address these issues, researchers have been intensively studying on an alternative for type of resonator by utilizing the new emerging MEMS (Micro-electro-mechanical systems) technology. Recent progress in this field has demonstrated a MEMS resonator with resonant frequency of 2.97 GHz and quality factor (measured in vacuum) of 42900. Despite this great achievement, this prototype is still far from being fully integrated into CMOS system due to incompatibility in fabrication process and its high series motional impedance. On the other hand, fully integrated MEMS resonator had been demonstrated but at lower frequency and quality factor. We propose a design and fabrication process for a low cost, high frequency and a high quality MEMS resonator, which can be integrated into a standard

  12. Design, simulation, fabrication, and characterization of MEMS vibration energy harvesters

    NASA Astrophysics Data System (ADS)

    Oxaal, John

    Energy harvesting from ambient sources has been a longtime goal for microsystem engineers. The energy available from ambient sources is substantial and could be used to power wireless micro devices, making them fully autonomous. Self-powered wireless sensors could have many applications in for autonomous monitoring of residential, commercial, industrial, geological, or biological environments. Ambient vibrations are of particular interest for energy harvesting as they are ubiquitous and have ample kinetic energy. In this work a MEMS device for vibration energy harvesting using a variable capacitor structure is presented. The nonlinear electromechanical dynamics of a gap-closing type structure is experimentally studied. Important experimental considerations such as the importance of reducing off-axis vibration during testing, characterization methods, dust contamination, and the effect of grounding on parasitic capacitance are discussed. A comprehensive physics based model is developed and validated with two different microfabricated devices. To achieve maximal power, devices with high aspect ratio electrodes and a novel two-level stopper system are designed and fabricated. The maximum achieved power from the MEMS device when driven by sinusoidal vibrations was 3.38 muW. Vibrations from HVAC air ducts, which have a primary frequency of 65 Hz and amplitude of 155 mgrms, are targeted as the vibration source and devices are designed for maximal power harvesting potential at those conditions. Harvesting from the air ducts, the devices reached 118 nW of power. When normalized to the operating conditions, the best figure of merit of the devices tested was an order of magnitude above state-of-the-art of the devices (1.24E-6).

  13. MEMS Deformable Mirrors for Adaptive Optics in Astronomical Imaging

    NASA Astrophysics Data System (ADS)

    Cornelissen, S.; Bierden, P. A.; Bifano, T.

    We report on the development of micro-electromechanical (MEMS) deformable mirrors designed for ground and space-based astronomical instruments intended for imaging extra-solar planets. Three different deformable mirror designs, a 1024 element continuous membrane (32x32), a 4096 element continuous membrane (64x64), and a 331 hexagonal segmented tip-tilt-piston are being produced for the Planet Imaging Concept Testbed Using a Rocket Experiment (PICTURE) program, the Gemini Planet Imaging Instrument, and the visible nulling coronograph developed at JPL for NASA's TPF mission, respectively. The design of these polysilicon, surface-micromachined MEMS deformable mirrors builds on technology that was pioneered at Boston University and has been used extensively to correct for ocular aberrations in retinal imaging systems and for compensation of atmospheric turbulence in free-space laser communication. These light-weight, low power deformable mirrors will have an active aperture of up to 25.2mm consisting of thin silicon membrane mirror supported by an array of 1024 to 4096 electrostatic actuators exhibiting no hysteresis and sub-nanometer repeatability. The continuous membrane deformable mirrors, coated with a highly reflective metal film, will be capable of up to 4μm of stroke, have a surface finish of <10nm RMS with a fill factor of 99.8%. The segmented device will have a range of motion of 1um of piston and a 600 arc-seconds of tip/tilt simultaneously and a surface finish of 1nm RMS. The individual mirror elements in this unique device, are designed such that they will maintain their flatness throughout the range of travel. New design features and fabrication processes are combined with a proven device architecture to achieve the desired performance and high reliability. Presented in this paper are device characteristic and performance results of these devices.

  14. On-Orbit, Immuno-Based, Label-Free White Blood Cell Counting System with Microelectromechanical Sensor Technology (OILWBCS-MEMS)

    NASA Technical Reports Server (NTRS)

    Edmonds, Jessica

    2015-01-01

    Aurora Flight Sciences, in partnership with Draper Laboratory, has developed a miniaturized system to count white blood cells in microgravity environments. The system uses MEMS technology to simultaneously count total white blood cells, the five white blood cell differential subgroups, and various lymphocyte subtypes. The OILWBCS-MEMS detection technology works by immobilizing an array of white blood cell-specific antibodies on small, gold-coated membranes. When blood flows across the membranes, specific cells' surface protein antigens bind to their corresponding antibodies. This binding can be measured and correlated to cell counts. In Phase I, the partners demonstrated surface chemistry sensitivity and specificity for total white blood cells and two lymphocyte subtypes. In Phase II, a functional prototype demonstrated end-to-end operation. This rugged, miniaturized device requires minimal blood sample preparation and will be useful for both space flight and terrestrial applications.

  15. Molecular sensors for MEMS

    NASA Astrophysics Data System (ADS)

    Huang, Chih-Yung

    Molecular sensors, known as pressure-sensitive paint and temperature-sensitive paint, are applied inside MEMS devices to obtain the internal and external flow fields. The spatial resolution for the PSP and TSP measurements has improved to 5 mum. The low-pressure PSP sensor has been investigated for use in MEMS measurements, with an application range from continuum flow to transition flow. PSP and TSP measurements in different micro devices have been obtained with the flow fields covering steady and unsteady, subsonic and supersonic flow. In microchannel measurements, the pressure distributions inside the microchannel have been obtained for Knudsen number from 0.006 to 0.8. Compressibility and rarefaction effects can be observed in the PSP data. Detailed information at the channel inlet was also collected to discuss the entrance effect for different flow regimes. For micronozzle experiments, four different micronozzles have been fabricated to study geometry effects at the micro scale. The pressure maps inside the micronozzle devices have been obtained with PSP sensors. A modified schlieren technique is used to compare the PSP results and investigate the shock wave behavior at high- and low-pressure conditions. Thick viscous layers in the micronozzle have been observed in the low-pressure measurements. For microjet impingements, heat transfer measurements have been collected with different microjet devices by using TSP sensors. For supersonic impinging microjet measurements, both pressure and temperature data have been obtained at different pressure ratios, impingement angles and impingement distances. Measurements reveal that the magnitude and number of shock cells decreases in the micro scale due to strong viscous effects. For microturbine measurements, averaged results of PSP and TSP measurements have been obtained for a rotation speed from 1300 to 4000 rpm. Phase-averaged results have been collected by using a laser triggering system at rotation speed of 1400 rpm

  16. An Accurate and Fault-Tolerant Target Positioning System for Buildings Using Laser Rangefinders and Low-Cost MEMS-Based MARG Sensors.

    PubMed

    Zhao, Lin; Guan, Dongxue; Landry, René; Cheng, Jianhua; Sydorenko, Kostyantyn

    2015-01-01

    Target positioning systems based on MEMS gyros and laser rangefinders (LRs) have extensive prospects due to their advantages of low cost, small size and easy realization. The target positioning accuracy is mainly determined by the LR's attitude derived by the gyros. However, the attitude error is large due to the inherent noises from isolated MEMS gyros. In this paper, both accelerometer/magnetometer and LR attitude aiding systems are introduced to aid MEMS gyros. A no-reset Federated Kalman Filter (FKF) is employed, which consists of two local Kalman Filters (KF) and a Master Filter (MF). The local KFs are designed by using the Direction Cosine Matrix (DCM)-based dynamic equations and the measurements from the two aiding systems. The KFs can estimate the attitude simultaneously to limit the attitude errors resulting from the gyros. Then, the MF fuses the redundant attitude estimates to yield globally optimal estimates. Simulation and experimental results demonstrate that the FKF-based system can improve the target positioning accuracy effectively and allow for good fault-tolerant capability.

  17. An Accurate and Fault-Tolerant Target Positioning System for Buildings Using Laser Rangefinders and Low-Cost MEMS-Based MARG Sensors

    PubMed Central

    Zhao, Lin; Guan, Dongxue; Landry, René Jr.; Cheng, Jianhua; Sydorenko, Kostyantyn

    2015-01-01

    Target positioning systems based on MEMS gyros and laser rangefinders (LRs) have extensive prospects due to their advantages of low cost, small size and easy realization. The target positioning accuracy is mainly determined by the LR’s attitude derived by the gyros. However, the attitude error is large due to the inherent noises from isolated MEMS gyros. In this paper, both accelerometer/magnetometer and LR attitude aiding systems are introduced to aid MEMS gyros. A no-reset Federated Kalman Filter (FKF) is employed, which consists of two local Kalman Filters (KF) and a Master Filter (MF). The local KFs are designed by using the Direction Cosine Matrix (DCM)-based dynamic equations and the measurements from the two aiding systems. The KFs can estimate the attitude simultaneously to limit the attitude errors resulting from the gyros. Then, the MF fuses the redundant attitude estimates to yield globally optimal estimates. Simulation and experimental results demonstrate that the FKF-based system can improve the target positioning accuracy effectively and allow for good fault-tolerant capability. PMID:26512672

  18. An algorithm for selection and design of hybrid power supplies for MEMS with a case study of a micro-gas chromatograph system

    NASA Astrophysics Data System (ADS)

    Cook, K. A.; Sastry, A. M.

    The Wireless Integrated Microsystems (WIMS)-environmental monitor testbed (EMT) is a multi-component microelectromechanical system (MEMS), incorporating complementary metal oxide semiconductor (CMOS) materials for high-precision circuits used for integrated sensors such as micro-g accelerometers, micro-gyroscopes, and pressure sensors. The WIMS-EMT duty cycle, like many autonomous MEMS systems, has low-power standby periods for sensing, and high-power pulses for R/F transmission and reception. In this paper, we present results of three strategies for providing power to this system, including (1) specification of a single, aggregate power supply, resulting in a single battery electrochemistry and cell size; (2) specification of several power supplies, by a priori division of power sources by power range; and (3) specification of an arbitrary number of power "bundles," based on available space in the device. The second approach provided the best results of mass (0.032 kg) and volume (0.028 L) among the three approaches. The second and third approaches provided the best battery lifetime results; both systems produced lifetimes in excess of 2E3 h. Future work will incorporate CMOS operational amplifier (op-amp) technologies to accommodate large voltage fluxes in many MEMS devices, and implementation of our approaches into a user-friendly code.

  19. Integrated microphotonic-MEMS inertial sensors

    NASA Astrophysics Data System (ADS)

    Zandi, Kazem

    The objective of this thesis is to design, simulate, fabricate and characterize high sensitive low cost in-plane photonic-band-gap (PBG)-micro electromechanical systems (MEMS)-based miniature accelerometers and rotational rate sensors (gyroscopes) on a silicon-on-insulator (SOI) substrate in order to enable the integration of an array of two-axis of these sensors on a single SOI platform. Use of guided-wave optical devices integrated with MEMS on SOI for multichannel/multifunction sensor systems allows the use of multiple sensors to extend the measurement range and accuracy. This provides essential redundancy which makes long-term reliability in the space environment possible therefore reducing the possibility of system failure. The navigator microchip also represents the ability of accommodating diverse attitude and inertial sensors on the same microchip to eliminate the need of many separate sensors. The end product exhibits orders of magnitude reduction in system mass and size. Furthermore, redundancy improves the net performance and precision of the navigation measurement systems. Two classes of optical accelerometers/gyroscopes are considered in this thesis for application in smallsats navigation, one based on tunable Fabry-Perot (FP) filter, where the sensor is actuated by the applied acceleration providing a shift in the operating wavelength that varies linearly with the applied acceleration and the other one based on variable optical attenuator (VOA), where the sensor is actuated by the applied acceleration providing a linear change for small displacements around the waveguide propagation axis in the relative signal intensity with the applied acceleration. In the case of FP-based sensors, the FP microcavity consists of two distributed Bragg reflectors (DBR) in which one DBR mirror is attached to the proof mass of the system. As a consequence of acceleration/rotation, the relative displacement of the movable mirror with respect to the fixed mirror changes

  20. Design of Surface Micromachined Compliant MEMS

    SciTech Connect

    Joe Anthony Bradley

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  1. Design of Surface micromachined Compliant MEMS

    SciTech Connect

    Joe Anthony Bradley

    2002-08-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  2. MEMS glaucoma monitoring device

    NASA Astrophysics Data System (ADS)

    Shankar, Smitha; Austin, Michael

    2007-04-01

    Glaucoma is a serious disease, affecting millions of people worldwide requiring continuous monitoring of Intra Ocular Pressure (IOP) to avoid the risk of blindness. Current laboratory measurements are infrequent, intrusive and do not indicate the progression of the disease. The paper reports on the development of an implantable Glaucoma monitoring system that can monitor IOP in the eye to indicate any elevation in risk to the patient. A mathematical model of the anterior chamber of the eye was used to analyze the complex fluid flow and pressure balance in the eye. This was done in order to determine the performance requirements of the actuator, sensor and transmission electronics that could be integrated on a single microchip using microelectromechanical systems (MEMS) technology, to carry out the testing internally. The accuracy of the system was theoretically tested against results from external medical tests. The results were found to be comparable.

  3. W-Coating for MEMS

    SciTech Connect

    Fleming, J.G.; Mani, S.S.; Sniegowski, J.J.

    1999-07-08

    The integration of miniaturized mechanical components has spawned a new technology known as microelectromechanical systems (MEMS). Surface micromachining, defined as the fabrication of micromechanical structures from deposited thin films, is one of the core technological processes underlying MEMS. Surface micromachined structures have a large ratio of surface area to volume which makes them particularly vulnerable to adhesion to the substrate or adjacent structures during release or in use--a problem is called stiction. Since microactuators can have surfaces in normal or sliding contact, function and wear are critical issues for reliable operation of MEMS devices. Surface modifications are needed to reduce adhesion and friction in micromechanical structures. In this paper, we will present a process used to selectively coat MEMS devices with Tungsten using a CVD (Chemical Vapor Deposition) process. We will discuss the effect of wet and vapor phase cleans along with different process variables. Endurance of the W coating is important, especially in applications where wear due to repetitive contacts with the film may occur. Further, tungsten is hard and chemically inert, Tungsten CVD is used in the integrated-circuit industry, which makes this, approach manufacturable.

  4. Microelectromechanical (MEMS) optical beam control

    NASA Astrophysics Data System (ADS)

    Laurvick, Tod; Starman, LaVern; Coutu, Ronald, Jr.

    2009-08-01

    This experiment explores the manufacturability of controllable Micro-electromechanical (MEMS) mirrors to direct optical signals. Design includes four separate mirrors which independently control vertical displacement, horizontal displacement, vertical pitch and horizontal pitch. Such devices could be used for a variety of applications but were specifically intended for future use in communications between optical based circuits residing on separate chips. Prototype devices were built in PolyMUMPs to test the feasibility of this process for applications such as this, including a full outgoing beam path with mirror orientations and actuation designs to accomplish this. Several elements of this outgoing beam path were successful and those which needed improvement indicate a high probability of success with limited trials needed. Improvement recommendations on currently successful design elements which could still be improved within the scope of PolyMUMPs have been identified. Originally intended only to direct the outgoing beam, this design could be used on the incoming path as well. Such a design would ensure that the receiving device only requires a target location and not that a specific incoming vector be obtained. This would thus comprise all the elements needed for a prototype proof of concept device to be built. More sophisticated fabrication processes could provide drastic improvements to both transmission and reception beam paths and potentially allow for a variety of more sophisticated designs to improve compactness, controllability, tighten tolerances on moving parts, increase mirror quality, and improved productivity of large quantities of devices.

  5. MEMS CLOSED CHAMBER HEAT ENGINE AND ELECTRIC GENERATOR

    NASA Technical Reports Server (NTRS)

    Landis, Geoffrey A. (Inventor)

    2005-01-01

    A heat engine, preferably combined with an electric generator, and advantageously implemented using micro-electromechanical system (MEMS) technologies as an array of one or more individual heat engine/generators. The heat engine is based on a closed chamber containing a motive medium, preferably a gas; means for alternately enabling and disabling transfer of thermal energy from a heat source to the motive medium; and at least one movable side of the chamber that moves in response to thermally-induced expansion and contraction of the motive medium, thereby converting thermal energy to oscillating movement. The electrical generator is combined with the heat engine to utilize movement of the movable side to convert mechanical work to electrical energy, preferably using electrostatic interaction in a generator capacitor. Preferably at least one heat transfer side of the chamber is placed alternately into and out of contact with the heat source by a motion capacitor, thereby alternately enabling and disabling conductive transfer of heat to the motive medium.

  6. Low-coherence interferometric absolute distance gauge for study of MEMS structures

    NASA Astrophysics Data System (ADS)

    Walecki, Wojciech J.; Lai, Kevin; Pravdivtsev, Alexander; Souchkov, Vitali; Van, Phuc; Azfar, Talal; Wong, Tim; Lau, S. H.; Koo, Ann

    2005-01-01

    The most commonly employed tools for wafer thickness and topography metrology are based on capacitance method, which due to physical size of probes, and may not be suitable for direct measurement of multi-layer non-conductive wafers or Micro Electromechanical Systems (MEMS) structures. Recently developed that low coherence interferometry provides solution, which overcomes limitations of these methods. Selected MEMS applications including characterization of deep (high aspect) trenches and membrane structures have been also developed. The above listed applications were limited to measurements of relative distance between two optical interfaces in material transparent at the wavelength of probing radiation. Absolute distance gauging by fiber optic low coherence interferometer is difficult due to large thermal drift (of the order of 0.04 mm/K). We demonstrate that this drift is a result of thermal changes of refractive index of fiber optic glass. We present solution eliminating this drift is based on introduction of the additional reference plane in the signal arm of the Michelson interferometer. Use of this reference plane eliminates influence of changes of refractive index of glass fibers on result of measurement and improves thermal stability of low coherence interferometer by three orders of magnitude.

  7. Graphene "microdrums" on a freestanding perforated thin membrane for high sensitivity MEMS pressure sensors.

    PubMed

    Wang, Qiugu; Hong, Wei; Dong, Liang

    2016-04-14

    We present a microelectromechanical system (MEMS) graphene-based pressure sensor realized by transferring a large area, few-layered graphene on a suspended silicon nitride thin membrane perforated by a periodic array of micro-through-holes. Each through-hole is covered by a circular drum-like graphene layer, namely a graphene "microdrum". The uniqueness of the sensor design is the fact that introducing the through-hole arrays into the supporting nitride membrane allows generating an increased strain in the graphene membrane over the through-hole array by local deformations of the holes under an applied differential pressure. Further reasons contributing to the increased strain in the devised sensitive membrane include larger deflection of the membrane than that of its imperforated counterpart membrane, and direct bulging of the graphene microdrum under an applied pressure. Electromechanical measurements show a gauge factor of 4.4 for the graphene membrane and a sensitivity of 2.8 × 10(-5) mbar(-1) for the pressure sensor with a good linearity over a wide pressure range. The present sensor outperforms most existing MEMS-based small footprint pressure sensors using graphene, silicon, and carbon nanotubes as sensitive materials, due to the high sensitivity. PMID:26988111

  8. A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes

    PubMed Central

    Zhao, Libo; Hu, Yingjie; Wang, Tongdong; Ding, Jianjun; Liu, Xixiang; Zhao, Yulong; Jiang, Zhuangde

    2016-01-01

    Methods to calculate fluid density and viscosity using a micro-cantilever and based on the resonance principle were put forward. Their measuring mechanisms were analyzed and the theoretical equations to calculate the density and viscosity were deduced. The fluid-solid coupling simulations were completed for the micro-cantilevers with different shapes. The sensing chips with micro-cantilevers were designed based on the simulation results and fabricated using the micro electromechanical systems (MEMS) technology. Finally, the MEMS resonant sensor was packaged with the sensing chip to measure the densities and viscosities of eight different fluids under the flexural and torsional vibrating modes separately. The relative errors of the measured densities from 600 kg/m3 to 900 kg/m3 and viscosities from 200 μPa·s to 1000 μPa·s were calculated and analyzed with different microcantilevers under various vibrating modes. The experimental results showed that the effects of the shape and vibrating mode of micro-cantilever on the measurement accuracies of fluid density and viscosity were analyzed in detail. PMID:27275823

  9. A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes.

    PubMed

    Zhao, Libo; Hu, Yingjie; Wang, Tongdong; Ding, Jianjun; Liu, Xixiang; Zhao, Yulong; Jiang, Zhuangde

    2016-01-01

    Methods to calculate fluid density and viscosity using a micro-cantilever and based on the resonance principle were put forward. Their measuring mechanisms were analyzed and the theoretical equations to calculate the density and viscosity were deduced. The fluid-solid coupling simulations were completed for the micro-cantilevers with different shapes. The sensing chips with micro-cantilevers were designed based on the simulation results and fabricated using the micro electromechanical systems (MEMS) technology. Finally, the MEMS resonant sensor was packaged with the sensing chip to measure the densities and viscosities of eight different fluids under the flexural and torsional vibrating modes separately. The relative errors of the measured densities from 600 kg/m³ to 900 kg/m³ and viscosities from 200 μPa·s to 1000 μPa·s were calculated and analyzed with different microcantilevers under various vibrating modes. The experimental results showed that the effects of the shape and vibrating mode of micro-cantilever on the measurement accuracies of fluid density and viscosity were analyzed in detail. PMID:27275823

  10. A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes.

    PubMed

    Zhao, Libo; Hu, Yingjie; Wang, Tongdong; Ding, Jianjun; Liu, Xixiang; Zhao, Yulong; Jiang, Zhuangde

    2016-01-01

    Methods to calculate fluid density and viscosity using a micro-cantilever and based on the resonance principle were put forward. Their measuring mechanisms were analyzed and the theoretical equations to calculate the density and viscosity were deduced. The fluid-solid coupling simulations were completed for the micro-cantilevers with different shapes. The sensing chips with micro-cantilevers were designed based on the simulation results and fabricated using the micro electromechanical systems (MEMS) technology. Finally, the MEMS resonant sensor was packaged with the sensing chip to measure the densities and viscosities of eight different fluids under the flexural and torsional vibrating modes separately. The relative errors of the measured densities from 600 kg/m³ to 900 kg/m³ and viscosities from 200 μPa·s to 1000 μPa·s were calculated and analyzed with different microcantilevers under various vibrating modes. The experimental results showed that the effects of the shape and vibrating mode of micro-cantilever on the measurement accuracies of fluid density and viscosity were analyzed in detail.

  11. Graphene "microdrums" on a freestanding perforated thin membrane for high sensitivity MEMS pressure sensors.

    PubMed

    Wang, Qiugu; Hong, Wei; Dong, Liang

    2016-04-14

    We present a microelectromechanical system (MEMS) graphene-based pressure sensor realized by transferring a large area, few-layered graphene on a suspended silicon nitride thin membrane perforated by a periodic array of micro-through-holes. Each through-hole is covered by a circular drum-like graphene layer, namely a graphene "microdrum". The uniqueness of the sensor design is the fact that introducing the through-hole arrays into the supporting nitride membrane allows generating an increased strain in the graphene membrane over the through-hole array by local deformations of the holes under an applied differential pressure. Further reasons contributing to the increased strain in the devised sensitive membrane include larger deflection of the membrane than that of its imperforated counterpart membrane, and direct bulging of the graphene microdrum under an applied pressure. Electromechanical measurements show a gauge factor of 4.4 for the graphene membrane and a sensitivity of 2.8 × 10(-5) mbar(-1) for the pressure sensor with a good linearity over a wide pressure range. The present sensor outperforms most existing MEMS-based small footprint pressure sensors using graphene, silicon, and carbon nanotubes as sensitive materials, due to the high sensitivity.

  12. Graphene ``microdrums'' on a freestanding perforated thin membrane for high sensitivity MEMS pressure sensors

    NASA Astrophysics Data System (ADS)

    Wang, Qiugu; Hong, Wei; Dong, Liang

    2016-03-01

    We present a microelectromechanical system (MEMS) graphene-based pressure sensor realized by transferring a large area, few-layered graphene on a suspended silicon nitride thin membrane perforated by a periodic array of micro-through-holes. Each through-hole is covered by a circular drum-like graphene layer, namely a graphene ``microdrum''. The uniqueness of the sensor design is the fact that introducing the through-hole arrays into the supporting nitride membrane allows generating an increased strain in the graphene membrane over the through-hole array by local deformations of the holes under an applied differential pressure. Further reasons contributing to the increased strain in the devised sensitive membrane include larger deflection of the membrane than that of its imperforated counterpart membrane, and direct bulging of the graphene microdrum under an applied pressure. Electromechanical measurements show a gauge factor of 4.4 for the graphene membrane and a sensitivity of 2.8 × 10-5 mbar-1 for the pressure sensor with a good linearity over a wide pressure range. The present sensor outperforms most existing MEMS-based small footprint pressure sensors using graphene, silicon, and carbon nanotubes as sensitive materials, due to the high sensitivity.

  13. Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review

    NASA Astrophysics Data System (ADS)

    Jiang, Shulan; Shi, Tielin; Zhan, Xiaobin; Xi, Shuang; Long, Hu; Gong, Bo; Li, Junjie; Cheng, Siyi; Huang, Yuanyuan; Tang, Zirong

    2015-11-01

    The carbon-based micro/nano electromechanical system (MEMS/NEMS) technique provides a powerful approach to large-scale manufacture of high-aspect-ratio carbon structures for wafer-level processing. The fabricated three-dimensional (3D) carbon structures have the advantages of excellent electrical and electrochemical properties, and superior biocompatibility. In order to improve their performance for applications in micro energy storage devices and microsensors, an increase in the footprint surface area is of great importance. Various approaches have been proposed for fabricating large surface area carbon-based structures, including the integration of nanostructures such as carbon nanotubes (CNTs), graphene, nanowires, nanofilms and nanowrinkles onto 3D structures, which has been proved to be effective and productive. Moreover, by etching the 3D photoresist microstructures through oxygen plasma or modifying the photoresist with specific materials which can be etched in the following pyrolysis process, micro/nano hierarchical carbon structures have been fabricated. These improved structures show excellent performance in various applications, especially in the fields of biological sensors, surface-enhanced Raman scattering, and energy storage devices such as micro-supercapacitors and fuel cells. With the rapid development of microelectronic devices, the carbon-based MEMS/NEMS technique could make more aggressive moves into microelectronics, sensors, miniaturized power systems, etc. In this review, the recent advances in the fabrication of micro/nano hierarchical carbon-based structures are introduced and the technical challenges and future outlook of the carbon-based MEMS/NEMS techniques are also analyzed.

  14. A Dual-Linear Kalman Filter for Real-Time Orientation Determination System Using Low-Cost MEMS Sensors

    PubMed Central

    Zhang, Shengzhi; Yu, Shuai; Liu, Chaojun; Yuan, Xuebing; Liu, Sheng

    2016-01-01

    To provide a long-time reliable orientation, sensor fusion technologies are widely used to integrate available inertial sensors for the low-cost orientation estimation. In this paper, a novel dual-linear Kalman filter was designed for a multi-sensor system integrating MEMS gyros, an accelerometer, and a magnetometer. The proposed filter precludes the impacts of magnetic disturbances on the pitch and roll which the heading is subjected to. The filter can achieve robust orientation estimation for different statistical models of the sensors. The root mean square errors (RMSE) of the estimated attitude angles are reduced by 30.6% under magnetic disturbances. Owing to the reduction of system complexity achieved by smaller matrix operations, the mean total time consumption is reduced by 23.8%. Meanwhile, the separated filter offers greater flexibility for the system configuration, as it is possible to switch on or off the second stage filter to include or exclude the magnetometer compensation for the heading. Online experiments were performed on the homemade miniature orientation determination system (MODS) with the turntable. The average RMSE of estimated orientation are less than 0.4° and 1° during the static and low-dynamic tests, respectively. More realistic tests on two-wheel self-balancing vehicle driving and indoor pedestrian walking were carried out to evaluate the performance of the designed MODS when high accelerations and angular rates were introduced. Test results demonstrate that the MODS is applicable for the orientation estimation under various dynamic conditions. This paper provides a feasible alternative for low-cost orientation determination. PMID:26907294

  15. A Dual-Linear Kalman Filter for Real-Time Orientation Determination System Using Low-Cost MEMS Sensors.

    PubMed

    Zhang, Shengzhi; Yu, Shuai; Liu, Chaojun; Yuan, Xuebing; Liu, Sheng

    2016-02-20

    To provide a long-time reliable orientation, sensor fusion technologies are widely used to integrate available inertial sensors for the low-cost orientation estimation. In this paper, a novel dual-linear Kalman filter was designed for a multi-sensor system integrating MEMS gyros, an accelerometer, and a magnetometer. The proposed filter precludes the impacts of magnetic disturbances on the pitch and roll which the heading is subjected to. The filter can achieve robust orientation estimation for different statistical models of the sensors. The root mean square errors (RMSE) of the estimated attitude angles are reduced by 30.6% under magnetic disturbances. Owing to the reduction of system complexity achieved by smaller matrix operations, the mean total time consumption is reduced by 23.8%. Meanwhile, the separated filter offers greater flexibility for the system configuration, as it is possible to switch on or off the second stage filter to include or exclude the magnetometer compensation for the heading. Online experiments were performed on the homemade miniature orientation determination system (MODS) with the turntable. The average RMSE of estimated orientation are less than 0.4° and 1° during the static and low-dynamic tests, respectively. More realistic tests on two-wheel self-balancing vehicle driving and indoor pedestrian walking were carried out to evaluate the performance of the designed MODS when high accelerations and angular rates were introduced. Test results demonstrate that the MODS is applicable for the orientation estimation under various dynamic conditions. This paper provides a feasible alternative for low-cost orientation determination.

  16. Si-based RF MEMS components.

    SciTech Connect

    Stevens, James E.; Nordquist, Christopher Daniel; Baker, Michael Sean; Fleming, James Grant; Stewart, Harold D.; Dyck, Christopher William

    2005-01-01

    Radio frequency microelectromechanical systems (RF MEMS) are an enabling technology for next-generation communications and radar systems in both military and commercial sectors. RF MEMS-based reconfigurable circuits outperform solid-state circuits in terms of insertion loss, linearity, and static power consumption and are advantageous in applications where high signal power and nanosecond switching speeds are not required. We have demonstrated a number of RF MEMS switches on high-resistivity silicon (high-R Si) that were fabricated by leveraging the volume manufacturing processes available in the Microelectronics Development Laboratory (MDL), a Class-1, radiation-hardened CMOS manufacturing facility. We describe novel tungsten and aluminum-based processes, and present results of switches developed in each of these processes. Series and shunt ohmic switches and shunt capacitive switches were successfully demonstrated. The implications of fabricating on high-R Si and suggested future directions for developing low-loss RF MEMS-based circuits are also discussed.

  17. Functional Micro-Dispensers based on Micro-Electro-Mechanical-Systems (MEMS) integrated with fabrics as functional materials to protect humans from mosquito feeding.

    PubMed

    Bernier, Ulrich R; Gurman, Pablo; Clark, Gary G; Elman, Noel

    2015-12-28

    Functional Micro-Dispensers (FMDs) based on Micro-Electro-Mechanical-Systems (MEMS) were designed to deliver spatial repellents that reduce the ability of mosquitoes to feed on humans. FMDs were integrated with fabrics as functional materials for protection against mosquito bites. The use of MEMS devices provides an unprecedented control over the release kinetics by means of integration with electronics for selective and timely activation of each device to perform controlled release of pesticides in air. In addition, because MEMS manufacturing techniques evolved from the microelectronic industry, FMDs can be mass produced at very low cost. Trials using FMDs that contained transfluthrin improved protection against mosquito feeding in human subjects above that of permethrin-treated uniform fabric worn on the arm of the volunteer. The overall reduction in feeding was approximately 90% compared to the untreated fabric control, and about 50% reduction compared to the permethrin-treated fabric control. The devices were efficacious over course of 32 days. FMDs have the potential for a simple and cost-effective implementation for mass adoption as wearable devices integrated in fabrics as active functional materials.

  18. Membrane cholesterol modulates cochlear electromechanics.

    PubMed

    Brownell, William E; Jacob, Stefan; Hakizimana, Pierre; Ulfendahl, Mats; Fridberger, Anders

    2011-06-01

    Changing the concentration of cholesterol in the plasma membrane of isolated outer hair cells modulates electromotility and prestin-associated charge movement, suggesting that a similar manipulation would alter cochlear mechanics. We examined cochlear function before and after depletion of membrane cholesterol with methyl-β-cyclodextrin (MβCD) in an excised guinea pig temporal bone preparation. The mechanical response of the cochlear partition to acoustic and/or electrical stimulation was monitored using laser interferometry and time-resolved confocal microscopy. The electromechanical response in untreated preparations was asymmetric with greater displacements in response to positive currents. Exposure to MβCD increased the magnitude and asymmetry of the response, without changing the frequency tuning of sound-evoked mechanical responses or cochlear microphonic potentials. Sodium salicylate reversibly blocked the enhanced electromechanical response in cholesterol depleted preparations. The increase of sound-evoked vibrations during positive current injection was enhanced following MβCD in some preparations. Imaging was used to assess cellular integrity which remained unchanged after several hours of exposure to MβCD in several preparations. The enhanced electromechanical response reflects an increase in outer hair cell electromotility and may reveal features of cholesterol distribution and trafficking in outer hair cells. PMID:21373862

  19. SHERPA Electromechanical Test Bed

    NASA Technical Reports Server (NTRS)

    Wason, John D.

    2005-01-01

    SHERPA (Strap-on High-altitude Entry Reconnaissance and Precision Aeromaneuver system) is a concept for low-cost-high-accuracy Martian reentry guidance for small scout-class missions with a capsule diameter of approximately 1 meter. This system uses moving masses to change the center of gravity of the capsule in order to control the lift generated by the controlled imbalance. This project involved designing a small proof-of-concept demonstration system that can be used to test the concept through bench-top testing, hardware-in-the-loop testing, and eventually through a drop test from a helicopter. This project has focused on the Mechatronic design aspects of the system including the mechanical, electrical, computer, and low-level control of the concept demonstration system.

  20. Electromechanical Properties of Bone Tissue.

    NASA Astrophysics Data System (ADS)

    Regimbal, Raymond L.

    Discrepancies between calculated and empirical properties of bone are thought to be due to a general lack of consideration for the extent and manner(s) with which bone components interact at the molecular level. For a bone component in physiological fluid or whenever two phases are in contact, there is a region between the bulk phases called the electrical double layer which is marked by a separation of electric charges. For the purpose of studying electrical double layer interactions, the method of particle microelectrophoresis was used to characterize bone and its major constituents on the basis of the net charge they bear when suspended in ionic media of physiological relevance. With the data presented as pH versus zeta (zeta ) potential, the figures reveal an isoelectric point (IEP) for bone mineral near pH 8.6, whereas intact and EDTA demineralized bone tissue both exhibit IEPs near pH 5.1. While these data demonstrate the potential for a significant degree of coulombic interaction between the bone mineral and organic constituent double layers, it was also observed that use of inorganic phosphate buffers, as a specific marker for bone mineral, resulted in (1) an immediate reversal, from positive to negative, of the bone mineral zeta potential (2) rendered the zeta potential of intact bone more negative in a manner linearly dependent on both time and temperature and (3) had no affect on demineralized bone (P < 0.01). In agreement with that shown in model protein-hydroxyapatite systems, it is suggested here that inorganic phosphate ions in solution compete with organic acid groups (e.g. carboxyl and phosphate of collagen, sialoprotein, ...) for positively charged sites on the bone mineral surface and effectively uncouple the bone mineral and organic phase double layers. Mechanically, this uncoupling is manifested as a loss of tissue rigidity when monitoring the midspan deflection of bone beams subject to constant load for a 3 day period. While it is thus

  1. Nano-electromechanical oscillators (NEMOs) for RF technologies.

    SciTech Connect

    Wendt, Joel Robert; Czaplewski, David A.; Gibson, John Murray; Webster, James R.; Carton, Andrew James; Keeler, Bianca Elizabeth Nelson; Carr, Dustin Wade; Friedmann, Thomas Aquinas; Tallant, David Robert; Boyce, Brad Lee; Sullivan, John Patrick; Dyck, Christopher William; Chen, Xidong

    2004-12-01

    Nano-electromechanical oscillators (NEMOs), capacitively-coupled radio frequency (RF) MEMS switches incorporating dissipative dielectrics, new processing technologies for tetrahedral amorphous carbon (ta-C) films, and scientific understanding of dissipation mechanisms in small mechanical structures were developed in this project. NEMOs are defined as mechanical oscillators with critical dimensions of 50 nm or less and resonance frequencies approaching 1 GHz. Target applications for these devices include simple, inexpensive clocks in electrical circuits, passive RF electrical filters, or platforms for sensor arrays. Ta-C NEMO arrays were used to demonstrate a novel optomechanical structure that shows remarkable sensitivity to small displacements (better than 160 fm/Hz {sup 1/2}) and suitability as an extremely sensitive accelerometer. The RF MEMS capacitively-coupled switches used ta-C as a dissipative dielectric. The devices showed a unipolar switching response to a unipolar stimulus, indicating the absence of significant dielectric charging, which has historically been the major reliability issue with these switches. This technology is promising for the development of reliable, low-power RF switches. An excimer laser annealing process was developed that permits full in-plane stress relaxation in ta-C films in air under ambient conditions, permitting the application of stress-reduced ta-C films in areas where low thermal budget is required, e.g. MEMS integration with pre-existing CMOS electronics. Studies of mechanical dissipation in micro- and nano-scale ta-C mechanical oscillators at room temperature revealed that mechanical losses are limited by dissipation associated with mechanical relaxation in a broad spectrum of defects with activation energies for mechanical relaxation ranging from 0.35 eV to over 0.55 eV. This work has established a foundation for the creation of devices based on nanomechanical structures, and outstanding critical research areas that need

  2. Close Up - Mem Fox.

    ERIC Educational Resources Information Center

    Moss, Barbara

    2003-01-01

    Presents an interview with Mem Fox, a teacher educator and children's book author well known throughout the world. Discusses writing books for children, and the mistakes she made early in her career as a writer. Notes that Mem is a tireless advocate for meaningful literacy instruction, and her "Radical Reflections: Passionate Opinions on Teaching,…

  3. Microwave Nano-abacus Electro-mechanical Oscillator

    NASA Astrophysics Data System (ADS)

    Peng, Haibing; Chang, C. W.; Aloni, S.; Yuzvinsky, T. D.; Zettl, A.

    2007-03-01

    We describe nanoscale electromechanical oscillators capable of operating in ambient-pressure air at room temperature with unprecedented fundamental resonance frequency of ˜4 GHz. The devices, created from suspended carbon nanotubes loaded abacus-style with inertial metal clamps yielding short effective beam lengths, open windows for immediate practical microwave frequency nanoelectromechanical systems (NEMS) applications.

  4. Design of active temperature compensated composite free-free beam MEMS resonators in a standard process

    NASA Astrophysics Data System (ADS)

    Xereas, George; Chodavarapu, Vamsy P.

    2014-03-01

    Frequency references are used in almost every modern electronic device including mobile phones, personal computers, and scientific and medical instrumentation. With modern consumer mobile devices imposing stringent requirements of low cost, low complexity, compact system integration and low power consumption, there has been significant interest to develop batch-manufactured MEMS resonators. An important challenge for MEMS resonators is to match the frequency and temperature stability of quartz resonators. We present 1MHz and 20MHz temperature compensated Free-Free beam MEMS resonators developed using PolyMUMPS, which is a commercial multi-user process available from MEMSCAP. We introduce a novel temperature compensation technique that enables high frequency stability over a wide temperature range. We used three strategies: passive compensation by using a structural gold (Au) layer on the resonator, active compensation through using a heater element, and a Free-Free beam design that minimizes the effects of thermal mismatch between the vibrating structure and the substrate. Detailed electro-mechanical simulations were performed to evaluate the frequency response and Quality Factor (Q). Specifically, for the 20MHz device, a Q of 10,000 was obtained for the passive compensated design. Finite Element Modeling (FEM) simulations were used to evaluate the Temperature Coefficient of frequency (TCf) of the resonators between -50°C and 125°C which yielded +0.638 ppm/°C for the active compensated, compared to -1.66 ppm/°C for the passively compensated design and -8.48 ppm/°C for uncompensated design for the 20MHz device. Electro-thermo-mechanical simulations showed that the heater element was capable of increasing the temperature of the resonators by approximately 53°C with an applied voltage of 10V and power consumption of 8.42 mW.

  5. Packaging and Reliability Issues in Micro/Nano Systems

    NASA Astrophysics Data System (ADS)

    Kim, Jongbaeg; Cheng, Yu-Ting; Chiao, Mu; Lin, Liwei

    The potential of MEMS/NEMS technologies has been viewed as a revolution comparable or even bigger than that of microelectronics. These scientific and engineering advancements in micro-/nano-electromechanical systems (MEMS)/(NEMS) could bring previously unthinkable applications to reality, from space systems, environmental instruments, to daily-life appliances. As presented in previous chapters, the development of core MEMS/NEMS processes has already demonstrated a lot of commercial applications as well as future potentials with elaborate functionalities. However, creating a low-cost reliable package for the protection of these MEMS/NEMS products is still a very difficult task. Without addressing these packaging and reliability issues, no commercial products can be sold on the market. Packaging design and modeling, packaging material selection, packaging process integration, and packaging cost are the main issues to be considered. In this chapter, we will present the fundamentals of MEMS/NEMS packaging technology, including packaging processes, hermetic and vacuum encapsulations, thermal issues, packaging reliability, and future packaging trends. The future development of MEMS packaging will rely on the success of the implementation of several unique techniques, such as packaging design kits for system and circuit designer, low-cost wafer-level and chip-scale packaging techniques, effective testing techniques, and reliable fabrication of an interposer [56.1] with vertical through-interconnects for device integrations.

  6. MEMS Applications in Aerodynamic Measurement Technology

    NASA Technical Reports Server (NTRS)

    Reshotko, E.; Mehregany, M.; Bang, C.

    1998-01-01

    Microelectromechanical systems (MEMS) embodies the integration of sensors, actuators, and electronics on a single substrate using integrated circuit fabrication techniques and compatible bulk and surface micromachining processes. Silicon and its derivatives form the material base for the MEMS technology. MEMS devices, including microsensors and microactuators, are attractive because they can be made small (characteristic dimension about 100 microns), be produced in large numbers with uniform performance, include electronics for high performance and sophisticated functionality, and be inexpensive. For aerodynamic measurements, it is preferred that sensors be small so as to approximate measurement at a point, and in fact, MEMS pressure sensors, wall shear-stress sensors, heat flux sensors and micromachined hot wires are nearing application. For the envisioned application to wind tunnel models, MEMS sensors can be placed on the surface or in very shallow grooves. MEMS devices have often been fabricated on stiff, flat silicon substrates, about 0.5 mm thick, and therefore were not easily mounted on curved surfaces. However, flexible substrates are now available and heat-flux sensor arrays have been wrapped around a curved turbine blade. Electrical leads can also be built into the flexible substrate. Thus MEMS instrumented wind tunnel models do not require deep spanwise grooves for tubes and leads that compromise the strength of conventionally instrumented models. With MEMS, even the electrical leads can potentially be eliminated if telemetry of the signals to an appropriate receiver can be implemented. While semiconductor silicon is well known for its electronic properties, it is also an excellent mechanical material for MEMS applications. However, silicon electronics are limited to operations below about 200 C, and silicon's mechanical properties start to diminish above 400 C. In recent years, silicon carbide (SiC) has emerged as the leading material candidate for

  7. Challenges in the Packaging of MEMS

    SciTech Connect

    BROWN, WILLIAM D.; EATON, WILLIAM P.; MALSHE, AJAY P.; MILLER, WILLIAM M.; O'NEAL, CHAD; SINGH, SUSHILA B.

    1999-09-24

    Microelectromechanical Systems (MEMS) packaging is much different from conventional integrated circuit (IC) packaging. Many MEMS devices must interface to the environment in order to perform their intended function, and the package must be able to facilitate access with the environment while protecting the device. The package must also not interfere with or impede the operation of the MEMS device. The die attachment material should be low stress, and low outgassing, while also minimizing stress relaxation overtime which can lead to scale factor shifts in sensor devices. The fabrication processes used in creating the devices must be compatible with each other, and not result in damage to the devices. Many devices are application specific requiring custom packages that are not commercially available. Devices may also need media compatible packages that can protect the devices from harsh environments in which the MEMS device may operate. Techniques are being developed to handle, process, and package the devices such that high yields of functional packaged parts will result. Currently, many of the processing steps are potentially harmful to MEMS devices and negatively affect yield. It is the objective of this paper to review and discuss packaging challenges that exist for MEMS systems and to expose these issues to new audiences from the integrated circuit packaging community.

  8. A silicon electromechanical photodetector.

    PubMed

    Tallur, Siddharth; Bhave, Sunil A

    2013-06-12

    Optomechanical systems have enabled wide-band optical frequency conversion and multichannel all-optical radio frequency amplification. Realization of an on-chip silicon communication platform is limited by photodetectors needed to convert optical information to electrical signals for further signal processing. In this paper we present a coupled silicon microresonator, which converts near-IR optical intensity modulation at 174.2 MHz and 1.198 GHz into motional electrical current. This device emulates a photodetector which detects intensity modulation of continuous wave laser light in the full-width-at-half-maximum bandwidth of the mechanical resonance. The resonant principle of operation eliminates dark current challenges associated with convetional photodetectors. While the results presented here constitute a purely classical demonstration, the device can also potentially be extended to the quantum regime to realize a photon-phonon translator. PMID:23706144

  9. Electromechanical simulations of dislocations

    NASA Astrophysics Data System (ADS)

    Skiba, Oxana; Gracie, Robert; Potapenko, Stanislav

    2013-04-01

    Improving the reliability of micro-electronic devices depends in part on developing a more in-depth understanding of dislocations because dislocations are barriers to charge carriers. To this end, the quasi-static simulation of discrete dislocations dynamics in materials under mechanical and electrical loads is presented. The simulations are based on the extended finite element method, where dislocations are modelled as internal discontinuities. The strong and weak forms of the boundary value problem for the coupled system are presented. The computation of the Peach-Koehler force using the J-integral is discussed. Examples to illustrate the accuracy of the simulations are presented. The motion of the network of the dislocations under different electrical and mechanical loads is simulated. It was shown that even in weak piezoelectric materials the effect of the electric field on plastic behaviour is significant.

  10. Nanoscale electromechanical parametric amplifier

    DOEpatents

    Aleman, Benjamin Jose; Zettl, Alexander

    2016-09-20

    This disclosure provides systems, methods, and apparatus related to a parametric amplifier. In one aspect, a device includes an electron source electrode, a counter electrode, and a pumping electrode. The electron source electrode may include a conductive base and a flexible conductor. The flexible conductor may have a first end and a second end, with the second end of the flexible conductor being coupled to the conductive base. A cross-sectional dimension of the flexible conductor may be less than about 100 nanometers. The counter electrode may be disposed proximate the first end of the flexible conductor and spaced a first distance from the first end of the flexible conductor. The pumping electrode may be disposed proximate a length of the flexible conductor and spaced a second distance from the flexible conductor.

  11. Characterization of Kova-Pyrex Anodically Bonded Samples: A New Packaging Approach for MEMS Devices

    NASA Technical Reports Server (NTRS)

    Vargo, S.; Green, A.; Mueller, J.; Bame, D.; Reinicke, R.

    2000-01-01

    The ability to anodically bond Kovar to Pyrex 7740 significantly expands the packaging approaches available for MEMS devices. This technique greatly simplifies and reliably interconnects micropropulsion MEMS components (thrusters, valves) with the attached propellant system.

  12. Monolithic integration of a MOSFET with a MEMS device

    DOEpatents

    Bennett, Reid; Draper, Bruce

    2003-01-01

    An integrated microelectromechanical system comprises at least one MOSFET interconnected to at least one MEMS device on a common substrate. A method for integrating the MOSFET with the MEMS device comprises fabricating the MOSFET and MEMS device monolithically on the common substrate. Conveniently, the gate insulator, gate electrode, and electrical contacts for the gate, source, and drain can be formed simultaneously with the MEMS device structure, thereby eliminating many process steps and materials. In particular, the gate electrode and electrical contacts of the MOSFET and the structural layers of the MEMS device can be doped polysilicon. Dopant diffusion from the electrical contacts is used to form the source and drain regions of the MOSFET. The thermal diffusion step for forming the source and drain of the MOSFET can comprise one or more of the thermal anneal steps to relieve stress in the structural layers of the MEMS device.

  13. The Impact of Emerging MEMS-Based Microsystems on US Defense Applications

    SciTech Connect

    STAPLE,BEVAN D.; JAKUBCZAK II,JEROME F.

    2000-01-20

    This paper examines the impact of inserting Micro-Electro-Mechanical Systems (MEMS) into US defense applications. As specific examples, the impacts of micro Inertial Measurement Units (IMUs), radio frequency MEMS (RF MEMS), and Micro-Opto-Electro-Mechanical Systems (MOEMS) to provide integrated intelligence, communication, and control to the defense infrastructure with increased affordability, functionality, and performance are highlighted.

  14. Printed Antennas Made Reconfigurable by Use of MEMS Switches

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.

    2005-01-01

    A class of reconfigurable microwave antennas now undergoing development comprise fairly conventional printed-circuit feed elements and radiating patches integrated with novel switches containing actuators of the microelectromechanical systems (MEMS) type. In comparison with solid-state electronic control devices incorporated into some prior printed microwave antennas, the MEMS-based switches in these antennas impose lower insertion losses and consume less power. Because the radio-frequency responses of the MEMS switches are more nearly linear, they introduce less signal distortion. In addition, construction and operation are simplified because only a single DC bias line is needed to control each MEMS actuator.

  15. Amorphous Diamond MEMS and Sensors

    SciTech Connect

    SULLIVAN, JOHN P.; FRIEDMANN, THOMAS A.; ASHBY, CAROL I.; DE BOER, MAARTEN P.; SCHUBERT, W. KENT; SHUL, RANDY J.; HOHLFELDER, ROBERT J.; LAVAN, D.A.

    2002-06-01

    This report describes a new microsystems technology for the creation of microsensors and microelectromechanical systems (MEMS) using stress-free amorphous diamond (aD) films. Stress-free aD is a new material that has mechanical properties close to that of crystalline diamond, and the material is particularly promising for the development of high sensitivity microsensors and rugged and reliable MEMS. Some of the unique properties of aD include the ability to easily tailor film stress from compressive to slightly tensile, hardness and stiffness 80-90% that of crystalline diamond, very high wear resistance, a hydrophobic surface, extreme chemical inertness, chemical compatibility with silicon, controllable electrical conductivity from insulating to conducting, and biocompatibility. A variety of MEMS structures were fabricated from this material and evaluated. These structures included electrostatically-actuated comb drives, micro-tensile test structures, singly- and doubly-clamped beams, and friction and wear test structures. It was found that surface micromachined MEMS could be fabricated in this material easily and that the hydrophobic surface of the film enabled the release of structures without the need for special drying procedures or the use of applied hydrophobic coatings. Measurements using these structures revealed that aD has a Young's modulus of {approx}650 GPa, a tensile fracture strength of 8 GPa, and a fracture toughness of 8 MPa{center_dot}m {sup 1/2}. These results suggest that this material may be suitable in applications where stiction or wear is an issue. Flexural plate wave (FPW) microsensors were also fabricated from aD. These devices use membranes of aD as thin as {approx}100 nm. The performance of the aD FPW sensors was evaluated for the detection of volatile organic compounds using ethyl cellulose as the sensor coating. For comparable membrane thicknesses, the aD sensors showed better performance than silicon nitride based sensors. Greater than

  16. Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators.

    PubMed

    Ducrot, Pierre-Henri; Dufour, Isabelle; Ayela, Cédric

    2016-01-01

    This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via the evaluation of the actuation performance of MEMS resonators. Conditions such as annealing duration, poling field and poling duration have been optimized and repeatability of the process has been demonstrated.

  17. Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators

    PubMed Central

    Ducrot, Pierre-Henri; Dufour, Isabelle; Ayela, Cédric

    2016-01-01

    This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via the evaluation of the actuation performance of MEMS resonators. Conditions such as annealing duration, poling field and poling duration have been optimized and repeatability of the process has been demonstrated. PMID:26792224

  18. Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators

    NASA Astrophysics Data System (ADS)

    Ducrot, Pierre-Henri; Dufour, Isabelle; Ayela, Cédric

    2016-01-01

    This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via the evaluation of the actuation performance of MEMS resonators. Conditions such as annealing duration, poling field and poling duration have been optimized and repeatability of the process has been demonstrated.

  19. A Three-Dimensional Microdisplacement Sensing System Based on MEMS Bulk-Silicon Technology

    PubMed Central

    Wu, Junjie; Lei, Lihua; Chen, Xin; Cai, Xiaoyu; Li, Yuan; Han, Tao

    2014-01-01

    For the dimensional measurement and characterization of microsized and nanosized components, a three-dimensional microdisplacement sensing system was developed using the piezoresistive effect in silicon. The sensor was fabricated using microelectromechanical system bulk-silicon technology, and it was validated using the finite element method. A precise data acquisition circuit with an accuracy of 20 μV was designed to obtain weak voltage signals. By calibration, the sensing system was shown to have a sensitivity of 17.29 mV/μm and 4.59 mV/μm in the axial and lateral directions, respectively; the nonlinearity in these directions was 0.8% and 1.0% full scale, respectively. A full range of 4.6 μm was achieved in the axial direction. Results of a resolution test indicated that the sensing system had a resolution of 5 nm in the axial direction and 10 nm in the lateral direction. PMID:25360581

  20. On-line smoothing for an integrated navigation system with low-cost MEMS inertial sensors.

    PubMed

    Chiang, Kai-Wei; Duong, Thanh Trung; Liao, Jhen-Kai; Lai, Ying-Chih; Chang, Chin-Chia; Cai, Jia-Ming; Huang, Shih-Ching

    2012-12-13

    The integration of the Inertial Navigation System (INS) and the Global Positioning System (GPS) is widely applied to seamlessly determine the time-variable position and orientation parameters of a system for navigation and mobile mapping applications. For optimal data fusion, the Kalman filter (KF) is often used for real-time applications. Backward smoothing is considered an optimal post-processing procedure. However, in current INS/GPS integration schemes, the KF and smoothing techniques still have some limitations. This article reviews the principles and analyzes the limitations of these estimators. In addition, an on-line smoothing method that overcomes the limitations of previous algorithms is proposed. For verification, an INS/GPS integrated architecture is implemented using a low-cost micro-electro-mechanical systems inertial measurement unit and a single-frequency GPS receiver. GPS signal outages are included in the testing trajectories to evaluate the effectiveness of the proposed method in comparison to conventional schemes.

  1. memP

    SciTech Connect

    Chambreau, C.

    2010-02-05

    The lightweight heap profiling tool memP Version 1 provides a library that can be used with MPI applications that make use of heap memory allocations to provide profile data based on the per-task high-water-mark of heap allocation. The memP output is generated as a text report that can present summary information or specific detail of the allocation call site data for each task The memP library source code is based on teh mpiP MPI profiling library (http://mpip.sourceforge.net), but is substantially different in functionality and organization.

  2. memP

    2010-02-05

    The lightweight heap profiling tool memP Version 1 provides a library that can be used with MPI applications that make use of heap memory allocations to provide profile data based on the per-task high-water-mark of heap allocation. The memP output is generated as a text report that can present summary information or specific detail of the allocation call site data for each task The memP library source code is based on teh mpiP MPI profilingmore » library (http://mpip.sourceforge.net), but is substantially different in functionality and organization.« less

  3. Three-axis MEMS Accelerometer for Structural Inspection

    NASA Astrophysics Data System (ADS)

    Barbin, E.; Koleda, A.; Nesterenko, T.; Vtorushin, S.

    2016-01-01

    Microelectromechanical system accelerometers are widely used for metrological measurements of acceleration, tilt, vibration, and shock in moving objects. The paper presents the analysis of MEMS accelerometer that can be used for the structural inspection. ANSYS Multiphysics platform is used to simulate the behavior of MEMS accelerometer by employing a finite element model and MATLAB/Simulink tools for modeling nonlinear dynamic systems.

  4. Combined electromechanical impedance and fiber optic diagnosis of aerospace structures

    NASA Astrophysics Data System (ADS)

    Schlavin, Jon; Zagrai, Andrei; Clemens, Rebecca; Black, Richard J.; Costa, Joey; Moslehi, Behzad; Patel, Ronak; Sotoudeh, Vahid; Faridian, Fereydoun

    2014-03-01

    Electromechanical impedance is a popular diagnostic method for assessing structural conditions at high frequencies. It has been utilized, and shown utility, in aeronautic, space, naval, civil, mechanical, and other types of structures. By contrast, fiber optic sensing initially found its niche in static strain measurement and low frequency structural dynamic testing. Any low frequency limitations of the fiber optic sensing, however, are mainly governed by its hardware elements. As hardware improves, so does the bandwidth (frequency range * number of sensors) provided by the appropriate enabling fiber optic sensor interrogation system. In this contribution we demonstrate simultaneous high frequency measurements using fiber optic and electromechanical impedance structural health monitoring technologies. A laboratory specimen imitating an aircraft wing structure, incorporating surfaces with adjustable boundary conditions, was instrumented with piezoelectric and fiber optic sensors. Experiments were conducted at different structural boundary conditions associated with deterioration of structural health. High frequency dynamic responses were collected at multiple locations on a laboratory wing specimen and conclusions were drawn about correspondence between structural damage and dynamic signatures as well as correlation between electromechanical impedance and fiber optic sensors spectra. Theoretical investigation of the effect of boundary conditions on electromechanical impedance spectra is presented and connection to low frequency structural dynamics is suggested. It is envisioned that acquisition of high frequency structural dynamic responses with multiple fiber optic sensors may open new diagnostic capabilities for fiber optic sensing technologies.

  5. Micromachined sensor systems on a chip: The integration of MEMS with CMOS and its applications

    SciTech Connect

    Smith, J.; Montague, S.; Sniegowski, J.

    1997-03-01

    The monolithic integration of micromechanical devices with their controlling electronics offers potential increases in performance as well as decreased cost for these devices. Analog Devices has demonstrated the commercial viability of this integration by interleaving micromechanical fabrication steps with microelectronic fabrication steps to produce a single-axis accelerometer on a chip. A next-generation integrated technology developed at Sandia National Laboratories eliminates many of the constraints associated with Analog`s process. This new technology enables the manufacture of complex micromachined sensor systems on a chip. An overview of Sandia`s micromachined system-on-a-chip technology along with application of the technology to inertial sensor systems designed by researchers at U.C. Berkeley will be given.

  6. Strongly Coupled Nanotube Electromechanical Resonators.

    PubMed

    Deng, Guang-Wei; Zhu, Dong; Wang, Xin-He; Zou, Chang-Ling; Wang, Jiang-Tao; Li, Hai-Ou; Cao, Gang; Liu, Di; Li, Yan; Xiao, Ming; Guo, Guang-Can; Jiang, Kai-Li; Dai, Xing-Can; Guo, Guo-Ping

    2016-09-14

    Coupling an electromechanical resonator with carbon-nanotube quantum dots is a significant method to control both the electronic charge and the spin quantum states. By exploiting a novel microtransfer technique, we fabricate two separate strongly coupled and electrically tunable mechanical resonators for the first time. The frequency of the two resonators can be individually tuned by the bottom gates, and in each resonator, the electron transport through the quantum dot can be strongly affected by the phonon mode and vice versa. Furthermore, the conductance of either resonator can be nonlocally modulated by the other resonator through phonon-phonon interaction between the two resonators. Strong coupling is observed between the phonon modes of the two resonators, where the coupling strength larger than 200 kHz can be reached. This strongly coupled nanotube electromechanical resonator array provides an experimental platform for future studies of the coherent electron-phonon interaction, the phonon-mediated long-distance electron interaction, and entanglement state generation.

  7. MEMS scanner mirror based system for retina scanning and in eye projection

    NASA Astrophysics Data System (ADS)

    Woittennek, Franziska; Knobbe, Jens; Pügner, Tino; Dallmann, Hans-Georg; Schelinski, Uwe; Grüger, Heinrich

    2015-02-01

    Many applications could benefit from miniaturized systems to scan blood vessels behind the retina in the human eye, so called "retina scanning". This reaches from access control to sophisticated security applications and medical devices. High volume systems for consumer applications require low cost and a user friendly operation. For example this includes no need for removal of glasses and self-adjustment, in turn guidance of focus and point of attraction by simultaneous projection for the user. A new system has been designed based on the well-known resonantly driven 2-d scanner mirror of Fraunhofer IPMS. A combined NIR and VIS laser system illuminates the eye through an eye piece designed for an operating distance allowing the use of glasses and granting sufficient field of view. This usability feature was considered to be more important than highest miniaturization. The modulated VIS laser facilitates the projection of an image directly onto the retina. The backscattered light from the continuous NIR laser contains the information of the blood vessels and is detected by a highly sensitive photo diode. A demonstrational setup has been realized including readout and driving electronics. The laser power was adjusted to an eye-secure level. Additional security features were integrated. Test measurements revealed promising results. In a first demonstration application the detection of biometric pattern of the blood vessels was evaluated for issues authentication in.

  8. MEMS based pumped liquid cooling systems for micro/nano spacecraft thermal control

    NASA Technical Reports Server (NTRS)

    Birur, G. C.; Shakkottai, P.; Sur, T. W.

    2000-01-01

    The electronic and other payload power densities in future micro/nano spacecraft are expected to exceed 25 Watts/cm(sup 2) and require advanced thermal control concepts and technologies to keep their payload within allowable temperature limits. This paper presents background on the need for pumped liquid cooling systems for future micro/nano spacecraft and results from this ongoing experimental investigation.

  9. An Implantable MEMS Micropump System for Drug Delivery in Small Animals

    PubMed Central

    Gensler, Heidi; Sheybani, Roya; Li, Po-Ying; Lo, Ronalee; Meng, Ellis

    2012-01-01

    We present the first implantable drug delivery system for controlled dosing, timing, and location in small animals. Current implantable drug delivery devices do not provide control over these factors or are not feasible for implantation in research animals as small as mice. Our system utilizes an integrated electrolysis micropump, is refillable, has an inert drug reservoir for broad drug compatibility, and is capable of adjustment to the delivery regimen while implanted. Electrochemical impedance spectroscopy (EIS) was used for characterization of electrodes on glass substrate and a flexible Parylene substrate. Benchtop testing of the electrolysis actuator resulted in flow rates from 1 to 34 μL/min on glass substrate and up to 6.8 μL/min on Parylene substrate. The fully integrated system generated a flow rate of 4.72 ± 0.35 μL/min under applied constant current of 1.0 mA while maintaining a power consumption of only ~3 mW. Finally, we demonstrated in vivo application of the system for anti-cancer drug delivery in mice. PMID:22273985

  10. Quantum electromechanics on silicon nitride nanomembranes

    NASA Astrophysics Data System (ADS)

    Fink, J. M.; Kalaee, M.; Pitanti, A.; Norte, R.; Heinzle, L.; Davanço, M.; Srinivasan, K.; Painter, O.

    2016-08-01

    Radiation pressure has recently been used to effectively couple the quantum motion of mechanical elements to the fields of optical or microwave light. Integration of all three degrees of freedom--mechanical, optical and microwave--would enable a quantum interconnect between microwave and optical quantum systems. We present a platform based on silicon nitride nanomembranes for integrating superconducting microwave circuits with planar acoustic and optical devices such as phononic and photonic crystals. Using planar capacitors with vacuum gaps of 60 nm and spiral inductor coils of micron pitch we realize microwave resonant circuits with large electromechanical coupling to planar acoustic structures of nanoscale dimensions and femtoFarad motional capacitance. Using this enhanced coupling, we demonstrate microwave backaction cooling of the 4.48 MHz mechanical resonance of a nanobeam to an occupancy as low as 0.32. These results indicate the viability of silicon nitride nanomembranes as an all-in-one substrate for quantum electro-opto-mechanical experiments.

  11. Electromechanical actuator for thrust vector control

    NASA Astrophysics Data System (ADS)

    Zubkow, Zygmunt

    Attention is given to the development and testing of electromechanical actuator (EMA) systems for use in first- and second-stage thrust vector control of rocket engines. An overview of the test program is also presented. Designs for both first- and second-stage actuators employ redundant dc brushless, three-phase rare-earth permanent magnet motors. The first-stage actuator is about 28 hp per motor and uses a roller screw. Second-stage thrust vector control is implemented with a much smaller actuator of about 1 hp per motor. This actuator uses a gear drive with a recycling ball screw mechanism. An operational EMA is presented. This 6.5-in. actuator is capable of a stall force of 1350 pounds per motor and a frequency response of about 5 HZ.

  12. BioMEMs.

    PubMed

    Gross, Brooks A

    2004-01-01

    This session is intended to provide insight into the development of BioMEMS in the academic and industrial settings and address the current challenges facing R&D. Each speaker will address the field of bioMEMS and collaborations between academia and industry from his point-of-view and provide examples of developmental successes and failures in his setting. The speakers will also submit potential solutions to the organizational problems they presently face and foresee in the future. As a panel, the speakers will exchange ideas with the attendees with the hope of collectively introducing solutions to the problems submitted during the talks and general guidelines for successful R&D of BioMEMS through productive collaboration among engineers and scientists of different disciplines and between academia and industry. Speakers: Professor Kensall D. Wise (Professor of EECS and Director of WIMS, U of Michigan), Dr. Michael A. Huff (Director of the MEMS Exchange), Colin Brenan (CTO, Biotrove).

  13. WGP structures patterned by Lloyd's mirror laser interference lithography system integrate into MEMS physical sensor device

    NASA Astrophysics Data System (ADS)

    Tseng, Kuo-Chun; Hong, Shuo-Ting; Lin, Te-Hsun; Chuang, Tzu-Han; Fu, Chien-Chung

    2016-03-01

    Wire-grid polarizers (WGPs) are composed of 1-D nanoscale periodic structures and are widely used in liquid crystal display devices to enhance the brightness and improve the utilization rate of the backlight source. This paper proposes the design and application of a WGP device for an microelectromechanical system physical force sensor derived through an optical measurement method. Infrared (IR) light was served as the signal source, with the initial angle set incident to the WGP, which was fabricated on microstructures such as cantilever beam, thin-film or bridge structures. According to the operation principle, when a physical force affects the microstructures, the incident angle of the signal light changes, which easily produces different transmission signal values for detection by an IR photodetector. Therefore, the proposed system can be used for optical contactless sensing in physical force sensing modules. Furthermore, the WGP structure introduced in this paper was defined using laser interference lithography and deposited with Al by E-beam evaporation.

  14. Sacrificial bridges for MEMS fabrication

    NASA Astrophysics Data System (ADS)

    Chang, Chao-Min; Chen, Yang-Che; Fong, Chien-Fu; Guu, Yunn-Horng; Chen, Rongshun; Yeh, J. Andrew; Hou, Max T.

    2011-09-01

    This study discusses sacrificial bridges that are used to release MEMS devices. Before being released, sacrificial bridges connect all the component structures into an integral structure. Solder bump bonding is used to mount the MEMS chip on another chip or a printed circuit board (PCB) and to maintain the alignment among all component structures after removal of the sacrificial bridges. Two types of sacrificial bridges were designed, analyzed and fabricated. The fabrication process—which used low resistivity single crystal silicon (SCS) wafers as the device material—was developed to implement the sacrificial bridges. Novel SCS through silicon vias (TSVs), which interconnect stacked chips, was made using the same process. An electrostatic comb drive actuator was fabricated and mounted onto a PCB. The fabricated actuator was tested to demonstrate the feasibility of the fabrication process, sacrificial bridges and SCS TSVs. The results show that the actuator worked well. Its maximum displacement and resonant frequency were 69.9 µm and 406 Hz, respectively. This method is promising for the delivery of a novel 3D system in package for MEMS devices.

  15. Advanced Microgravity Acceleration Measurement Systems (AMAMS) Being Developed

    NASA Technical Reports Server (NTRS)

    Sicker, Ronald J.; Kacpura, Thomas J.

    2003-01-01

    The Advanced Microgravity Acceleration Measurement Systems (AMAMS) project is part of NASA s Instrument Technology Development program to develop advanced sensor systems. The primary focus of the AMAMS project is to develop microelectromechanical systems (MEMS) for acceleration sensor systems to replace existing electromechanical sensor systems presently used to assess relative gravity levels aboard spacecraft. These systems are used to characterize both vehicle and payload responses to low-gravity vibroacoustic environments. The collection of microgravity acceleration data is useful to the microgravity life sciences, microgravity physical sciences, and structural dynamics communities. The inherent advantages of semiconductor-based systems are reduced size, mass, and power consumption, with enhanced long-term calibration stability.

  16. Laser Interferometry for Harsh Environment MEMS Sensors

    NASA Astrophysics Data System (ADS)

    Nieva, Patricia

    2008-03-01

    Silicon-based MEMS technology has enabled the fabrication of a broad range of sensor and actuator systems that are having a great impact in areas that benefit from miniaturization and increased functionality. The main advantage of Si-based MEMS technologies is their possibility of integration with microelectronics thus allowing the economical production of smart microsystems. In the automotive industry for example, there is a need for inexpensive smart MEMS sensors for engine control applications. For instance, smart MEMS sensors capable of operating ``in cylinder'', where temperatures are around 400 C, could continuously monitor the combustion quality of the cylinders of automotive engines thus leading to reduced emissions and improved fuel economy. However, when the environment temperature is too high (>180 C), conventional Si-based microelectronics suffer from severe performance degradation, thus making smart Si-based MEMS impractical. Hence, further development, in terms of new MEMS materials and/or new technologies, is needed especially where high temperature capability is crucial to realizing improved electronic control. Remote sensing through optical signal detection has major advantages for safe signal transmission in harsh environments. It is highly resistant to electromagnetic interference (EMI) and radio frequency interference (RFI) and at the same time, it eliminates the necessity of on-board electronics, which has been one of the main obstacles in the development of smart MEMS sensors for high temperature applications. An economical way to deal with higher temperatures and other aggressive environmental conditions is to build MEMS sensors out of robust materials (e.g. Silicon nitride, SiC) and integrate them with optical signal detection techniques to form MOEMS. In this paper, we review recent trends for the use of laser interferometry for MEMS sensors in the context of using them for high temperature applications. Technological challenges faced in

  17. Understanding multi-scale structural evolution in granular systems through gMEMS

    NASA Astrophysics Data System (ADS)

    Walker, David M.; Tordesillas, Antoinette

    2013-06-01

    We show how the rheological response of a material to applied loads can be systematically coded, analyzed and succinctly summarized, according to an individual grain's property (e.g. kinematics). Individual grains are considered as their own smart sensor akin to microelectromechanical systems (e.g. gyroscopes, accelerometers), each capable of recognizing their evolving role within self-organizing building block structures (e.g. contact cycles and force chains). A symbolic time series is used to represent their participation in such self-assembled building blocks and a complex network summarizing their interrelationship with other grains is constructed. In particular, relationships between grain time series are determined according to the information theory Hamming distance or the metric Euclidean distance. We then use topological distance to find network communities enabling groups of grains at remote physical metric distances in the material to share a classification. In essence grains with similar structural and functional roles at different scales are identified together. This taxonomy distills the dissipative structural rearrangements of grains down to its essential features and thus provides pointers for objective physics-based internal variable formalisms used in the construction of robust predictive continuum models.

  18. BioMEMS in drug delivery.

    PubMed

    Nuxoll, Eric

    2013-11-01

    The drive to design micro-scale medical devices which can be reliably and uniformly mass produced has prompted many researchers to adapt processing technologies from the semiconductor industry. By operating at a much smaller length scale, the resulting biologically-oriented microelectromechanical systems (BioMEMS) provide many opportunities for improved drug delivery: Low-dose vaccinations and painless transdermal drug delivery are possible through precisely engineered microneedles which pierce the skin's barrier layer without reaching the nerves. Low-power, low-volume BioMEMS pumps and reservoirs can be implanted where conventional pumping systems cannot. Drug formulations with geometrically complex, extremely uniform micro- and nano-particles are formed through micromolding or with microfluidic devices. This review describes these BioMEMS technologies and discusses their current state of implementation. As these technologies continue to develop and capitalize on their simpler integration with other MEMS-based systems such as computer controls and telemetry, BioMEMS' impact on the field of drug delivery will continue to increase.

  19. High voltage DC switchgear development for multi-kW space power system: Aerospace technology development of three types of solid state power controllers for 200-1100VDC with current ratings of 25, 50, and 80 amperes with one type utilizing an electromechanical device

    NASA Technical Reports Server (NTRS)

    Billings, W. W.

    1981-01-01

    Three types of solid state power controllers (SSPC's) for high voltage, high power DC system applications were developed. The first type utilizes a SCR power switch. The second type employes an electromechanical power switch element with solid state commutation. The third type utilizes a transistor power switch. Significant accomplishments include high operating efficiencies, fault clearing, high/low temperature performance and vacuum operation.

  20. Liquid Tunable Microlenses based on MEMS techniques

    PubMed Central

    Zeng, Xuefeng; Jiang, Hongrui

    2013-01-01

    The recent rapid development in microlens technology has provided many opportunities for miniaturized optical systems, and has found a wide range of applications. Of these microlenses, tunable-focus microlenses are of special interest as their focal lengths can be tuned using micro-scale actuators integrated with the lens structure. Realization of such tunable microlens generally relies on the microelectromechanical system (MEMS) technologies. Here, we review the recent progress in tunable liquid microlenses. The underlying physics relevant to these microlenses are first discussed, followed by description of three main categories of tunable microlenses involving MEMS techniques, mechanically driven, electrically driven, and those integrated within microfluidic systems. PMID:24163480

  1. Micro electro-mechanical heater

    DOEpatents

    Oh, Yunje; Asif, Syed Amanulla Syed; Cyrankowski, Edward; Warren, Oden Lee

    2016-04-19

    A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface.

  2. Electromechanical properties of graphene drumheads.

    PubMed

    Klimov, Nikolai N; Jung, Suyong; Zhu, Shuze; Li, Teng; Wright, C Alan; Solares, Santiago D; Newell, David B; Zhitenev, Nikolai B; Stroscio, Joseph A

    2012-06-22

    We determined the electromechanical properties of a suspended graphene layer by scanning tunneling microscopy (STM) and scanning tunneling spectroscopy (STS) measurements, as well as computational simulations of the graphene-membrane mechanics and morphology. A graphene membrane was continuously deformed by controlling the competing interactions with a STM probe tip and the electric field from a back-gate electrode. The probe tip-induced deformation created a localized strain field in the graphene lattice. STS measurements on the deformed suspended graphene display an electronic spectrum completely different from that of graphene supported by a substrate. The spectrum indicates the formation of a spatially confined quantum dot, in agreement with recent predictions of confinement by strain-induced pseudomagnetic fields.

  3. MEMS Technology for Space Applications

    NASA Technical Reports Server (NTRS)

    vandenBerg, A.; Spiering, V. L.; Lammerink, T. S. J.; Elwenspoek, M.; Bergveld, P.

    1995-01-01

    Micro-technology enables the manufacturing of all kinds of components for miniature systems or micro-systems, such as sensors, pumps, valves, and channels. The integration of these components into a micro-electro-mechanical system (MEMS) drastically decreases the total system volume and mass. These properties, combined with the increasing need for monitoring and control of small flows in (bio)chemical experiments, makes MEMS attractive for space applications. The level of integration and applied technology depends on the product demands and the market. The ultimate integration is process integration, which results in a one-chip system. An example of process integration is a dosing system of pump, flow sensor, micromixer, and hybrid feedback electronics to regulate the flow. However, for many applications, a hybrid integration of components is sufficient and offers the advantages of design flexibility and even the exchange of components in the case of a modular set up. Currently, we are working on hybrid integration of all kinds of sensors (physical and chemical) and flow system modules towards a modular system; the micro total analysis system (micro TAS). The substrate contains electrical connections as in a printed circuit board (PCB) as well as fluid channels for a circuit channel board (CCB) which, when integrated, form a mixed circuit board (MCB).

  4. In-situ Iberian pig carcass classification using a micro-electro-mechanical system (MEMS)-based near infrared (NIR) spectrometer.

    PubMed

    Zamora-Rojas, E; Pérez-Marín, D; De Pedro-Sanz, E; Guerrero-Ginel, J E; Garrido-Varo, A

    2012-03-01

    Iberian pig (IP) products are gourmet foods highly appreciated at international markets, reaching high prices, because of its exquisite flavors. At present, there aren't practical and affordable analytical methods which can authenticate every single piece put on the market. This paper reports on the performance of a handheld micro-electro-mechanical system (MEMS)-based spectrometer (1600-2400nm) for authentication-classification of individual IP carcasses into different commercial categories. Performance (accuracy and instrumental design) of the instrument was compared with that of high-resolution NIRS monochromators (400-2500nm). A total of 300 carcasses of IPs raised under different feeding regimes ("Acorn", "Recebo" and "Feed") were analyzed in three modes (intact fat in the carcass, skin-free subcutaneous fat samples and melted fat samples). The best classification results for the MEMS instrument were: 93.9% "Acorn" carcasses correctly classified, 96.4% "Feed" and 60.6% "Recebo", respectively. Evaluation of model performance confirmed the suitability of the handheld device for individual, fast, non-destructive, low-cost analysis of IP carcasses on the slaughterhouse line.

  5. The NASA GSFC MEMS Colloidal Thruster

    NASA Technical Reports Server (NTRS)

    Cardiff, Eric H.; Jamieson, Brian G.; Norgaard, Peter C.; Chepko, Ariane B.

    2004-01-01

    A number of upcoming missions require different thrust levels on the same spacecraft. A highly scaleable and efficient propulsion system would allow substantial mass savings. One type of thruster that can throttle from high to low thrust while maintaining a high specific impulse is a Micro-Electro-Mechanical System (MEMS) colloidal thruster. The NASA GSFC MEMS colloidal thruster has solved the problem of electrical breakdown to permit the integration of the electrode on top of the emitter by a novel MEMS fabrication technique. Devices have been successfully fabricated and the insulation properties have been tested to show they can support the required electric field. A computational finite element model was created and used to verify the voltage required to successfully operate the thruster. An experimental setup has been prepared to test the devices with both optical and Time-Of-Flight diagnostics.

  6. IC-Compatible Technologies for Optical MEMS

    SciTech Connect

    Krygowski, T.W.; Sniegowski, J.J.

    1999-04-30

    Optical Micro Electro Mechanical Systems (Optical MEMS) Technology holds the promise of one-day producing highly integrated optical systems on a common, monolithic substrate. The choice of fabrication technology used to manufacture Optical MEMS will play a pivotal role in the size, functionality and ultimately the cost of optical Microsystems. By leveraging the technology base developed for silicon integrated circuits, large batches of routers, emitters, detectors and amplifiers will soon be fabricated for literally pennies per part. In this article we review the current status of technologies used for Optical MEMS, as well as fabrication technologies of the future, emphasizing manufacturable surface micromachining approaches to producing reliable, low-cost devices for optical communications applications.

  7. 40 HP Electro-Mechanical Actuator

    NASA Technical Reports Server (NTRS)

    Fulmer, Chris

    1996-01-01

    This report summarizes the work performed on the 40 BP electro-mechanical actuator (EMA) system developed on NASA contract NAS3-25799 for the NASA National Launch System and Electrical Actuation (ELA) Technology Bridging Programs. The system was designed to demonstrate the capability of large, high power linear ELA's for applications such as Thrust Vector Control (TVC) on rocket engines. It consists of a motor controller, high frequency power source, drive electronics and a linear actuator. The power source is a 25kVA 20 kHz Mapham inverter. The drive electronics are based on the pulse population modulation concept and operate at a nominal frequency of 40 kHz. The induction motor is a specially designed high speed, low inertia motor capable of a 68 peak HP. The actuator was originally designed by MOOG Aerospace under an internal R & D program to meet Space Shuttle Main Engine (SSME) TVC requirements. The design was modified to meet this programs linear rate specification of 7.4 inches/second. The motor and driver were tested on a dynamometer at the Martin Marietta Space Systems facility. System frequency response and step response tests were conducted at the Marshall Space Flight Center facility. A complete description of the system and all test results can be found in the body of the report.

  8. RF MEMS Based Reconfigurable Antennas

    NASA Technical Reports Server (NTRS)

    Simons, Rainee N.

    2004-01-01

    The presentation will first of all address the advantages of RF MEMS circuit in antenna applications and also the need for electronically reconfigurable antennas. Next, discuss some of the recent examples of RF MEMS based reconfigurable microstrip antennas. Finally, conclude the talk with a summary of MEMS antenna performance.

  9. A multimode electromechanical parametric resonator array

    PubMed Central

    Mahboob, I.; Mounaix, M.; Nishiguchi, K.; Fujiwara, A.; Yamaguchi, H.

    2014-01-01

    Electromechanical resonators have emerged as a versatile platform in which detectors with unprecedented sensitivities and quantum mechanics in a macroscopic context can be developed. These schemes invariably utilise a single resonator but increasingly the concept of an array of electromechanical resonators is promising a wealth of new possibilities. In spite of this, experimental realisations of such arrays have remained scarce due to the formidable challenges involved in their fabrication. In a variation to this approach, we identify 75 harmonic vibration modes in a single electromechanical resonator of which 7 can also be parametrically excited. The parametrically resonating modes exhibit vibrations with only 2 oscillation phases which are used to build a binary information array. We exploit this array to execute a mechanical byte memory, a shift-register and a controlled-NOT gate thus vividly illustrating the availability and functionality of an electromechanical resonator array by simply utilising higher order vibration modes. PMID:24658349

  10. Circuit electromechanics with single photon strong coupling

    SciTech Connect

    Xue, Zheng-Yuan Yang, Li-Na; Zhou, Jian

    2015-07-13

    In circuit electromechanics, the coupling strength is usually very small. Here, replacing the capacitor in circuit electromechanics by a superconducting flux qubit, we show that the coupling among the qubit and the two resonators can induce effective electromechanical coupling which can attain the strong coupling regime at the single photon level with feasible experimental parameters. We use dispersive couplings among two resonators and the qubit while the qubit is also driven by an external classical field. These couplings form a three-wave mixing configuration among the three elements where the qubit degree of freedom can be adiabatically eliminated, and thus results in the enhanced coupling between the two resonators. Therefore, our work constitutes the first step towards studying quantum nonlinear effect in circuit electromechanics.

  11. Effect of nonlinear electromechanical interaction upon wind power generator behavior

    NASA Astrophysics Data System (ADS)

    Selyutskiy, Yury D.; Klimina, Liubov A.

    2014-12-01

    A mathematical model is developed for describing a small horizontal axis wind turbine with electric generator, such that the electromechanical interaction is non-linear in current. Dependence of steady regimes of the system upon parameters of the model is studied. In particular, it is shown that increase of wind speed causes qualitative restructuring of the set of steady regimes, which leads to considerable change in behavior of the wind power generator. The proposed model is verified against data obtained in experiments.

  12. Electromechanical actuator for the tongs of a servomanipulator

    DOEpatents

    Martin, H. Lee; Killough, Stephen M.

    1986-01-01

    Computer-augmented electromechanical system is provided for controlling the tongs of a servomanipulator. The mechanical tongs are motor-driven through the remote slave arm of the manipulator, and the motor control current is supplied by a position sensor which senses the position of a spring-loaded trigger in the master arm handle on the manipulator. The actuator for the tongs provides the operator with artificial force reflection in a unilateral force-force control loop.

  13. Monitoring of slope-instabilities and deformations with Micro-Electro-Mechanical-Systems (MEMS) in wireless ad-hoc Sensor Networks

    NASA Astrophysics Data System (ADS)

    Arnhardt, C.; Fernández-Steeger, T. M.; Azzam, R.

    2009-04-01

    In most mountainous regions, landslides represent a major threat to human life, properties and infrastructures. Nowadays existing landslide monitoring systems are often characterized by high efforts in terms of purchase, installation, maintenance, manpower and material. In addition (or because of this) only small areas or selective points of the endangered zone can be observed by the system. Therefore the improvement of existing and the development of new monitoring and warning systems are of high relevance. The joint project "Sensor based Landslide Early Warning Systems" (SLEWS) deals with the development of a prototypic Alarm- and Early Warning system (EWS) for different types of landslides using low-cost micro-sensors (MEMS) integrated in a wireless sensor network (WSN). Modern so called Ad-Hoc, Multi-Hop wireless sensor networks (WSN) are characterized by a self organizing and self-healing capacity of the system (autonomous systems). The network consists of numerous individual and own energy-supply operating sensor nodes, that can send data packages from their measuring devices (here: MEMS) over other nodes (Multi-Hop) to a collection point (gateway). The gateway provides the interface to central processing and data retrieval units (PC, Laptop or server) outside the network. In order to detect and monitor the different landslide processes (like fall, topple, spreading or sliding) 3D MEMS capacitive sensors made from single silicon crystals and glass were chosen to measure acceleration, tilting and altitude changes. Based on the so called MEMS (Micro-Electro-Mechanical Systems) technology, the sensors combine very small mechanical and electronic units, sensing elements and transducers on a small microchip. The mass production of such type of sensors allows low cost applications in different areas (like automobile industries, medicine, and automation technology). Apart from the small and so space saving size and the low costs another advantage is the energy

  14. MEMS fluidic actuator

    DOEpatents

    Kholwadwala, Deepesh K.; Johnston, Gabriel A.; Rohrer, Brandon R.; Galambos, Paul C.; Okandan, Murat

    2007-07-24

    The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.

  15. Quasi-optical MEMS switching array technology

    NASA Astrophysics Data System (ADS)

    Zhang, Weikang

    During this Ph.D. dissertation research, both experimental and theoretical investigations have been conducted to develop new micro-elecro-mechancical systems (MEMS) based technologies and new device concepts for the microwave and millimeter wave frequency range. A proof-of-principle E-band (60GHz˜90GHz) MEMS switching array has been successful designed and constructed, where 400 MEMS switches form a two dimensional array on a 2inch x 2inch quartz substrate. The E-band MEMS grid array switch has demonstrated >6 dB maximum isolation at 76 GHz and >10 dB on/off contrast ratio at 70˜85 GHz. Extensive work has been carried out with the aim of developing a compact impedance matching method for quasi-optic grid arrays. A new device concept is presented, where bulk micro-machining techniques are utilized to create a new class of artificial materials with continuously variable dielectric constant for use in millimeter wave quasi-optical systems. Based on this bulk micro-machined material, two novel quasi-optical impedance transformers have been modeled, designed, and characterized, which provide ideal impedance matching for quasi-optical systems. Photonic bandgap (PBG) RF circuit models also have been studied for microwave and millimeter wave applications. During the course of this development activity, materials characteristics have been analyzed for their suitability in quasi-optical grid array circuit and RF MEMS device applications. Air bridge MEMS switches have been designed, fabricated and characterized for microwave and millimeter wave applications.

  16. Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices

    PubMed Central

    Zhang, Wen-Ming; Meng, Guang; Chen, Di

    2007-01-01

    Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary to understand the effects of electrostatic forces in MEMS and then many phenomena of practical importance, such as pull-in instability and the effects of effective stiffness, dielectric charging, stress gradient, temperature on the pull-in voltage, nonlinear dynamic effects and reliability due to electrostatic forces occurred in MEMS can be explained scientifically, and consequently the great potential of MEMS technology could be explored effectively and utilized optimally. A simplified parallel-plate capacitor model is proposed to investigate the resonance response, inherent nonlinearity, stiffness softened effect and coupled nonlinear effect of the typical electrostatically actuated MEMS devices. Many failure modes and mechanisms and various methods and techniques, including materials selection, reasonable design and extending the controllable travel range used to analyze and reduce the failures are discussed in the electrostatically actuated MEMS devices. Numerical simulations and discussions indicate that the effects of instability, nonlinear characteristics and reliability subjected to electrostatic forces cannot be ignored and are in need of further investigation.

  17. VCSELs for interferometric readout of MEMS sensors

    NASA Astrophysics Data System (ADS)

    Serkland, Darwin K.; Geib, Kent M.; Peake, Gregory M.; Keeler, Gordon A.; Shaw, Michael J.; Baker, Michael S.; Okandan, Murat

    2016-03-01

    We report on the development of single-frequency VCSELs (vertical-cavity surface-emitting lasers) for sensing the position of a moving MEMS (micro-electro-mechanical system) object with resolution much less than 1nm. Position measurement is the basis of many different types of MEMS sensors, including accelerometers, gyroscopes, and pressure sensors. Typically, by switching from a traditional capacitive electronic readout to an interferometric optical readout, the resolution can be improved by an order of magnitude with a corresponding improvement in MEMS sensor performance. Because the VCSEL wavelength determines the scale of the position measurement, laser wavelength (frequency) stability is desirable. This paper discusses the impact of VCSEL amplitude and frequency noise on the position measurement.

  18. MEMS-Based Spinning Nozzle

    NASA Technical Reports Server (NTRS)

    Okojie, Robert S. (Inventor)

    2003-01-01

    A nozzle body and assembly for delivering atomized fuel to a combustion chamber. The nozzle body is rotatably mounted onto a substrate. One or more curvilinear fuel delivery channels are in flow communication with an internal fuel distribution cavity formed in the nozzle body. Passage of pressurized fuel through the nozzle body causes the nozzle body to rotate. Components of the nozzle assembly are formed of silicon carbide having surfaces etched by deep reactive ion etching utilizing MEMS (micro-electro-mechanical systems) technology. A fuel premix chamber is carried on the substrate in flow communication with a supply passage in the nozzle body.

  19. Respiratory Magnetogram Detected with a MEMS Device

    PubMed Central

    Dominguez-Nicolas, Saul M.; Juarez-Aguirre, Raul; Herrera-May, Agustin L.; Garcia-Ramirez, Pedro; Figueras, Eduard; Gutierrez-D., Edmundo A.; Tapia, Jesus A.; Trejo, Argelia; Manjarrez, Elias

    2013-01-01

    Magnetic fields generated by the brain or the heart are very useful in clinical diagnostics. Therefore, magnetic signals produced by other organs are also of considerable interest. Here we show first evidence that thoracic muscles can produce a strong magnetic flux density during respiratory activity, that we name respiratory magnetogram. We used a small magnetometer based on microelectromechanical systems (MEMS), which was positioned inside the open thoracic cage of anaesthetized and ventilated rats. With this new MEMS sensor of about 20 nT resolution, we recorded a strong and rhythmic respiratory magnetogram of about 600 nT. PMID:24046516

  20. Controller modeling and evaluation for PCV electro-mechanical actuator

    NASA Astrophysics Data System (ADS)

    Parker, Joey K.

    1993-11-01

    Hydraulic actuators are currently used to operate the propellant control valves (PCV) for the space shuttle main engine (SSME) and other rocket engines. These actuators are characterized by large power to weight ratios, large force capabilities, and rapid accelerations, which favor their use in control valve applications. However, hydraulic systems are also characterized by susceptibility to contamination, which leads to frequent maintenance requirements. The Control Mechanisms Branch (EP34) of the Component Development Division of the Propulsion Laboratory at the Marshall Space Flight Center (MSFC) has been investigating the application of electromechanical actuators as replacements for the hydraulic units in PCV's over the last few years. This report deals with some testing and analysis of a PCV electromechanical actuator (EMA) designed and fabricated by HR Textron, Inc. This prototype actuator has undergone extensive testing by EP34 personnel since early 1993. At this time, the performance of the HR Textron PCV EMA does not meet requirements for position tracking.

  1. Controller modeling and evaluation for PCV electro-mechanical actuator

    NASA Technical Reports Server (NTRS)

    Parker, Joey K.

    1993-01-01

    Hydraulic actuators are currently used to operate the propellant control valves (PCV) for the space shuttle main engine (SSME) and other rocket engines. These actuators are characterized by large power to weight ratios, large force capabilities, and rapid accelerations, which favor their use in control valve applications. However, hydraulic systems are also characterized by susceptibility to contamination, which leads to frequent maintenance requirements. The Control Mechanisms Branch (EP34) of the Component Development Division of the Propulsion Laboratory at the Marshall Space Flight Center (MSFC) has been investigating the application of electromechanical actuators as replacements for the hydraulic units in PCV's over the last few years. This report deals with some testing and analysis of a PCV electromechanical actuator (EMA) designed and fabricated by HR Textron, Inc. This prototype actuator has undergone extensive testing by EP34 personnel since early 1993. At this time, the performance of the HR Textron PCV EMA does not meet requirements for position tracking.

  2. A review of mechanical and electromechanical properties of piezoelectric nanowires.

    PubMed

    Espinosa, Horacio D; Bernal, Rodrigo A; Minary-Jolandan, Majid

    2012-09-01

    Piezoelectric nanowires are promising building blocks in nanoelectronic, sensing, actuation and nanogenerator systems. In spite of great progress in synthesis methods, quantitative mechanical and electromechanical characterization of these nanostructures is still limited. In this article, the state-of-the art in experimental and computational studies of mechanical and electromechanical properties of piezoelectric nanowires is reviewed with an emphasis on size effects. The review covers existing characterization and analysis methods and summarizes data reported in the literature. It also provides an assessment of research needs and opportunities. Throughout the discussion, the importance of coupling experimental and computational studies is highlighted. This is crucial for obtaining unambiguous size effects of nanowire properties, which truly reflect the effect of scaling rather than a particular synthesis route. We show that such a combined approach is critical to establish synthesis-structure-property relations that will pave the way for optimal usage of piezoelectric nanowires. PMID:22581695

  3. Optical zoom lens module using MEMS deformable mirrors for portable device

    NASA Astrophysics Data System (ADS)

    Lu, Jia-Shiun; Su, Guo-Dung J.

    2012-10-01

    The thickness of the smart phones in today's market is usually below than 10 mm, and with the shrinking of the phone volume, the difficulty of its production of the camera lens has been increasing. Therefore, how to give the imaging device more functionality in the smaller space is one of the interesting research topics for today's mobile phone companies. In this paper, we proposed a thin optical zoom system which is combined of micro-electromechanical components and reflective optical architecture. By the adopting of the MEMS deformable mirrors, we can change their radius of curvature to reach the optical zoom in and zoom out. And because we used the all-reflective architecture, so this system has eliminated the considerable chromatic aberrations in the absence of lenses. In our system, the thickness of the zoom system is about 11 mm. The smallest EFL (effective focal length) is 4.61 mm at a diagonal field angle of 52° and f/# of 5.24. The longest EFL of the module is 9.22 mm at a diagonal field angle of 27.4 with f/# of 5.03.°

  4. Characteristic of torsional vibration of mill main drive excited by electromechanical coupling

    NASA Astrophysics Data System (ADS)

    Zhang, Yifang; Yan, Xiaoqiang; Lin, Qihui

    2016-01-01

    In the study of electromechanical coupling vibration of mill main drive system, the influence of electrical system on the mechanical transmission is considered generally, however the research for the mechanism of electromechanical interaction is lacked. In order to research the electromechanical coupling resonance of main drive system on the F3 mill in a plant, the cycloconverter and synchronous motor are modeled and simulated by the MTLAB/SIMULINK firstly, simulation result show that the current harmonic of the cycloconverter can lead to the pulsating torque of motor output. Then the natural characteristics of the mechanical drive system are calculated by ANSYS, the result show that the modal frequency contains the component which is close to the coupling vibration frequency of 42Hz. According to the simulation result of the mechanical and electrical system, the closed loop feedback model including the two systems are built, and the mechanism analysis of electromechanical coupling presents that there is the interaction between the current harmonic of electrical system and the speed of the mechanical drive system. At last, by building and computing the equivalent nonlinear dynamics model of the mechanical drive system, the dynamic characteristics of system changing with the stiffness, damping coefficient and the electromagnetic torque are obtained. Such electromechanical interaction process is suggested to consider in research of mill vibration, which can induce strong coupling vibration behavior in the rolling mill drive system.

  5. Urban MEMS based seismic network for post-earthquakes rapid disaster assessment

    NASA Astrophysics Data System (ADS)

    D'Alessandro, Antonino; Luzio, Dario; D'Anna, Giuseppe

    2014-05-01

    Life losses following disastrous earthquake depends mainly by the building vulnerability, intensity of shaking and timeliness of rescue operations. In recent decades, the increase in population and industrial density has significantly increased the exposure to earthquakes of urban areas. The potential impact of a strong earthquake on a town center can be reduced by timely and correct actions of the emergency management centers. A real time urban seismic network can drastically reduce casualties immediately following a strong earthquake, by timely providing information about the distribution of the ground shaking level. Emergency management centers, with functions in the immediate post-earthquake period, could be use this information to allocate and prioritize resources to minimize loss of human life. However, due to the high charges of the seismological instrumentation, the realization of an urban seismic network, which may allow reducing the rate of fatalities, has not been achieved. Recent technological developments in MEMS (Micro Electro-Mechanical Systems) technology could allow today the realization of a high-density urban seismic network for post-earthquakes rapid disaster assessment, suitable for the earthquake effects mitigation. In the 1990s, MEMS accelerometers revolutionized the automotive-airbag system industry and are today widely used in laptops, games controllers and mobile phones. Due to their great commercial successes, the research into and development of MEMS accelerometers are actively pursued around the world. Nowadays, the sensitivity and dynamics of these sensors are such to allow accurate recording of earthquakes with moderate to strong magnitude. Due to their low cost and small size, the MEMS accelerometers may be employed for the realization of high-density seismic networks. The MEMS accelerometers could be installed inside sensitive places (high vulnerability and exposure), such as schools, hospitals, public buildings and places of

  6. MEMS-BASED 3D CONFOCAL SCANNING MICROENDOSCOPE USING MEMS SCANNERS FOR BOTH LATERAL AND AXIAL SCAN.

    PubMed

    Liu, Lin; Wang, Erkang; Zhang, Xiaoyang; Liang, Wenxuan; Li, Xingde; Xie, Huikai

    2014-08-15

    A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ± 26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

  7. A novel prototyping method for die-level monolithic integration of MEMS above-IC

    NASA Astrophysics Data System (ADS)

    Cicek, Paul-Vahe; Zhang, Qing; Saha, Tanmoy; Mahdavi, Sareh; Allidina, Karim; Nabki, Frederic; El Gamal, Mourad

    2013-06-01

    This work presents a convenient and versatile prototyping method for integrating surface-micromachined microelectromechanical systems (MEMS) directly above IC electronics, at the die level. Such localized implementation helps reduce development costs associated with the acquisition of full-sized semiconductor wafers. To demonstrate the validity of this method, variants of an IC-compatible surface-micromachining MEMS process are used to build different MEMS devices above a commercial transimpedance amplifier chip. Subsequent functional assessments for both the electronics and the MEMS indicate that the integration is successful, validating the prototyping methodology presented in this work, as well as the suitability of the selected MEMS technology for above-IC integration.

  8. Electromechanical decoupled model for cantilever-beam piezoelectric energy harvesters

    NASA Astrophysics Data System (ADS)

    Tan, T.; Yan, Z.; Hajj, M.

    2016-09-01

    Analysis of cantilever-based piezoelectric energy harvesting systems is usually performed using coupled equations that represent the mechanical displacement and the voltage output. These equations are then solved simultaneously. In contrast to this representation, we use analytical solutions of the governing equation to derive an algebraic equation of the power as a function of the beam displacement, electromechanical coefficients, and the load resistance. Such an equation can be more useful in the design of such harvesters. Particularly, the mechanical displacement is computed from a mechanical governing equation with modified natural frequency and damping ratio that account for the electromechanical coupling. The voltage and the harvested power are then obtained by relating them directly to the mechanical displacement. We validate the proposed analysis by comparing its solution including the tip displacement and harvested power with those of numerical simulations of the governing equations. To demonstrate the generality of the proposed approach, we consider the cases of base excitation, galloping, and autoparametric vibration. The model proposed in this study simplifies the electromechanical coupling problem for practical applications of cantilever-beam piezoelectric energy harvesting systems.

  9. EDITORIAL: Selected papers from the 11th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2011) Selected papers from the 11th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2011)

    NASA Astrophysics Data System (ADS)

    Cho, Young-Ho

    2012-09-01

    This special section of Journal of Micromechanics and Microengineering features papers selected from the 11th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2011), held at Sejong Hotel in Seoul, Korea during 15-18 November 2011. Since the first PowerMEMS workshop held in Sendai, Japan in 2000, the workshop has developed as the premier forum for reporting research results in micro and nanotechnology for power generation, energy conversion, harvesting and processing applications, including in-depth technical issues on nanostructures and materials for small-scale high-density energy and thermal management. Potential PowerMEMS applications cover not only portable power devices for consumer electronics and remote sensors, but also micro engines, impulsive thrusters and fuel cells for systems ranging from the nanometer to the millimeter scale. The 2011 technical program consists of 1 plenary talk, 4 invited talks and 118 contributed presentations. The 48 oral and 70 poster presentations, selected by 27 Technical Program Committee Members from 131 submitted abstracts, have stimulated lively discussion maximizing the interaction between participants. Among them, this special section includes 9 papers covering micro-scale power generators, energy converters, harvesters, thrusters and thermal coolers. Finally, we are grateful to the members of the International Steering Committee, the Technical Program Committee, and the Local Organizing Committee for their efforts and contributions to PowerMEMS 2011. We also thank the two companies Samsung Electro-Mechanics and LG Elite for technical tour arrangements. Special thanks go to Dr Ian Forbes, the editorial staff of the Journal of Micromechanics and Microengineering, as well as to the staff of IOP Publishing for making this special section possible.

  10. Shifting the Inertial Navigation Paradigm with MEMS Technology

    NASA Technical Reports Server (NTRS)

    Crain, Timothy; Brady, Tye; Bishop, Robert H.

    2010-01-01

    Why don t you use MEMS? is one of the most common questions posed to navigation systems engineers designing inertial navigation solutions in the modern era. The question stems from a general understanding that great strides have been made in terrestrial MEMS accelerometers and attitude rate sensors in terms of accuracy, mass, and power. Yet, when compared on a unit-to-unit basis, MEMS devices do not provide comparable performance (accuracy) to navigation grade sensors. This paper will propose a paradigm shift where the comparison in performance is between multiple MEMS devices and a single navigation grade sensor. The concept is that systematically, a sufficient number of MEMS sensors may mathematically provide comparable performance to a single navigation grade device and be competitive in terms power and mass allocations when viewed on a systems level. The implication is that both inertial navigation system design and fault detection, identification, and recovery could benefit from a system of MEMS devices in the same way that swarm sensing has benefited Earth observation and astronomy. A survey of the state of the art in inertial sensor accuracy scaled by mass and power will be provided to show the specific error in MEMS and navigation graded devices, a mathematical comparison of multi-unit to single-unit sensor errors will be developed, and preliminary applications to Constellation vehicles will be explored.

  11. Shifting the Intertial Navigation Paradigm with the MEMS Technology

    NASA Technical Reports Server (NTRS)

    Crain, Timothy P., II; Bishop, Robert H.; Brady, Tye

    2010-01-01

    "Why don't you use MEMS?" is of the most common questions posed to navigation systems engineers designing inertial navigation solutions in the modern era. The question stems from a general understanding that great strides have been made in terrestrial MEMS accelerometers and attitude rate sensors in terms of accuracy, mass, and power. Yet, when compared on a unit-to-unit basis, MEMS devices do not provide comparable performance (accuracy) to navigation grade sensors in several key metrics. This paper will propose a paradigm shift where the comparison in performance is between multiple MEMS devices and a single navigation grade sensor. The concept is that systematically, a sufficient number of MEMS sensors may mathematically provide comparable performance to a single navigation grade device and be competitive in terms power and mass allocations when viewed on a systems level. The implication is that both inertial navigation system design and fault detection, identification, and recovery could benefit from a system of MEMS devices in the same way that swarm sensing has benefited Earth observation and astronomy. A survey of the state of the art in inertial sensor accuracy scaled by mass and power will be provided to show the scaled error in MEMS and navigation graded devices, a mathematical comparison of multi-unit to single-unit sensor errors will be developed, and preliminary application to an Orion lunar skip atmospheric entry trajectory will be explored.

  12. Photonic MEMS switch applications

    NASA Astrophysics Data System (ADS)

    Husain, Anis

    2001-07-01

    As carriers and service providers continue their quest for profitable network solutions, they have shifted their focus from raw bandwidth to rapid provisioning, delivery and management of revenue generating services. Inherently transparent to data rate the transmission wavelength and data format, MEMS add scalability, reliability, low power and compact size providing flexible solutions to the management and/or fiber channels in long haul, metro, and access networks. MEMS based photonic switches have gone from the lab to commercial availability and are now currently in carrier trials and volume production. 2D MEMS switches offer low up-front deployment costs while remaining scalable to large arrays. They allow for transparent, native protocol transmission. 2D switches enable rapid service turn-up and management for many existing and emerging revenue rich services such as storage connectivity, optical Ethernet, wavelength leasing and optical VPN. As the network services evolve, the larger 3D MEMS switches, which provide greater scalability and flexibility, will become economically viable to serve the ever-increasing needs.

  13. The 18 mm[superscript 2] Laboratory: Teaching MEMS Development with the SUMMiT Foundry Process

    ERIC Educational Resources Information Center

    Dallas, T.; Berg, J. M.; Gale, R. O.

    2012-01-01

    This paper describes the goals, pedagogical system, and educational outcomes of a three-semester curriculum in microelectromechanical systems (MEMS). The sequence takes engineering students with no formal MEMS training and gives them the skills to participate in cutting-edge MEMS research and development. The evolution of the curriculum from…

  14. Chemical Detection Based on Adsorption-Induced and Photo-Induced Stresses in MEMS Devices

    SciTech Connect

    Datskos, P.G.

    1999-04-05

    Recently there has been an increasing demand to perform real-time in-situ chemical detection of hazardous materials, contraband chemicals, and explosive chemicals. Currently, real-time chemical detection requires rather large analytical instrumentation that are expensive and complicated to use. The advent of inexpensive mass produced MEMS (micro-electromechanical systems) devices opened-up new possibilities for chemical detection. For example, microcantilevers were found to respond to chemical stimuli by undergoing changes in their bending and resonance frequency even when a small number of molecules adsorb on their surface. In our present studies, we extended this concept by studying changes in both the adsorption-induced stress and photo-induced stress as target chemicals adsorb on the surface of microcantilevers. For example, microcantilevers that have adsorbed molecules will undergo photo-induced bending that depends on the number of absorbed molecules on the surface. However, microcantilevers that have undergone photo-induced bending will adsorb molecules on their surfaces in a distinctly different way. Depending on the photon wavelength and microcantilever material, the microcantilever can be made to bend by expanding or contracting the irradiated surface. This is important in cases where the photo-induced stresses can be used to counter any adsorption-induced stresses and increase the dynamic range. Coating the surface of the microstructure with a different material can provide chemical specificity for the target chemicals. However, by selecting appropriate photon wavelengths we can change the chemical selectivity due to the introduction of new surface states in the MEMS device. We will present and discuss our results on the use of adsorption-induced and photo-induced bending of microcantilevers for chemical detection.

  15. Aerospace applications of mass market MEMS products

    NASA Astrophysics Data System (ADS)

    Bauer, Karin; Kroetz, Gerhard; Schalk, Josef; Mueller, Gerhard

    2002-07-01

    Aerospace applications of MEMS products, originally developed for automotive mass markets, are discussed. Various sensor examples with a high dual use potential are presented: inertial sensing, flow and gas sensing, robust micro sensors including SiC- and GaN-based devices, as well as first approaches towards flexible and distributed microsystems. In Europe the automotive industry is one of the main MEMS market drivers, simply because of the sheer size of this market and Europe's strong position in this industrial field. Main MEMS activities are development and integration of vehicle dynamics sensing systems, passenger safety and navigation systems, air and fuel intake systems, as well as sensor systems for exhaust gas after treatment and climate control. Benefits on the customer side are increased safety, passenger comfort and reduced fuel consumption. Benefits on the manufacturer's side are increased sub-system integration, modularity and reduced production cost. In the future the aerospace industry is likely to benefit from the introduction of micro-systems for the same reasons as the automotive industry. Interests of the aerospace industry are increasing safety and reliability of airplane operation, health and state monitoring of fuselage and airplane subsystems as well as improving service and maintenance procedures. In comparison to automotive applications, the numbers of devices needed is likely to be much smaller, however, new challenges arise in so far as distributed sensing and actuating microsystems will be needed. The idea is to identify and to exploit synergies between automotive mass market MEMS applications and lower-volume aerospace ones. The effort necessary to meet aerospace requirements and the extent of necessary trade-offs in customizing automotive MEMS is addressed considering the above-mentioned examples.

  16. Design of high power electromechanical actuator for thrust vector control

    NASA Technical Reports Server (NTRS)

    Cowan, J. R.; Myers, W. N.

    1991-01-01

    NASA-Marshall has undertaken the development of electromechanical actuators (EMAs) for thrust vector control (TVC) augmentation system implementation. The TVC EMA presented has as its major components two three-phase brushless dc motors, a two-pass gear-reduction system, and a roller screw for rotary-to-linear motion conversion. System control is furnished by a solid-state electronic controller and power supply; a pair of resolvers deliver position feedback to the controller, such that precise positioning is achieved. Peformance comparisons have been conducted between the EMA and comparable-performance hydraulic systems applicable to TVCs.

  17. Quantum electromechanics on silicon nitride nanomembranes

    PubMed Central

    Fink, J. M.; Kalaee, M.; Pitanti, A.; Norte, R.; Heinzle, L.; Davanço, M.; Srinivasan, K.; Painter, O.

    2016-01-01

    Radiation pressure has recently been used to effectively couple the quantum motion of mechanical elements to the fields of optical or microwave light. Integration of all three degrees of freedom—mechanical, optical and microwave—would enable a quantum interconnect between microwave and optical quantum systems. We present a platform based on silicon nitride nanomembranes for integrating superconducting microwave circuits with planar acoustic and optical devices such as phononic and photonic crystals. Using planar capacitors with vacuum gaps of 60 nm and spiral inductor coils of micron pitch we realize microwave resonant circuits with large electromechanical coupling to planar acoustic structures of nanoscale dimensions and femtoFarad motional capacitance. Using this enhanced coupling, we demonstrate microwave backaction cooling of the 4.48 MHz mechanical resonance of a nanobeam to an occupancy as low as 0.32. These results indicate the viability of silicon nitride nanomembranes as an all-in-one substrate for quantum electro-opto-mechanical experiments. PMID:27484751

  18. Solitary electromechanical pulses in lobster neurons.

    PubMed

    Gonzalez-Perez, A; Mosgaard, L D; Budvytyte, R; Villagran-Vargas, E; Jackson, A D; Heimburg, T

    2016-09-01

    Investigations of nerve activity have focused predominantly on electrical phenomena. Nerves, however, are thermodynamic systems, and changes in temperature and in the dimensions of the nerve can also be observed during the action potential. Measurements of heat changes during the action potential suggest that the nerve pulse shares many characteristics with an adiabatic pulse. First experiments in the 1980s suggested small changes in nerve thickness and length during the action potential. Such findings have led to the suggestion that the action potential may be related to electromechanical solitons traveling without dissipation. However, there have been no modern attempts to study mechanical phenomena in nerves. Here, we present ultrasensitive AFM recordings of mechanical changes on the order of 2-12Å in the giant axons of the lobster. We show that the nerve thickness changes in phase with voltage changes. When stimulated at opposite ends of the same axon, colliding action potentials pass through one another and do not annihilate. These observations are consistent with a mechanical interpretation of the nervous impulse. PMID:27448851

  19. Solitary electromechanical pulses in lobster neurons.

    PubMed

    Gonzalez-Perez, A; Mosgaard, L D; Budvytyte, R; Villagran-Vargas, E; Jackson, A D; Heimburg, T

    2016-09-01

    Investigations of nerve activity have focused predominantly on electrical phenomena. Nerves, however, are thermodynamic systems, and changes in temperature and in the dimensions of the nerve can also be observed during the action potential. Measurements of heat changes during the action potential suggest that the nerve pulse shares many characteristics with an adiabatic pulse. First experiments in the 1980s suggested small changes in nerve thickness and length during the action potential. Such findings have led to the suggestion that the action potential may be related to electromechanical solitons traveling without dissipation. However, there have been no modern attempts to study mechanical phenomena in nerves. Here, we present ultrasensitive AFM recordings of mechanical changes on the order of 2-12Å in the giant axons of the lobster. We show that the nerve thickness changes in phase with voltage changes. When stimulated at opposite ends of the same axon, colliding action potentials pass through one another and do not annihilate. These observations are consistent with a mechanical interpretation of the nervous impulse.

  20. Quantum electromechanics on silicon nitride nanomembranes.

    PubMed

    Fink, J M; Kalaee, M; Pitanti, A; Norte, R; Heinzle, L; Davanço, M; Srinivasan, K; Painter, O

    2016-01-01

    Radiation pressure has recently been used to effectively couple the quantum motion of mechanical elements to the fields of optical or microwave light. Integration of all three degrees of freedom-mechanical, optical and microwave-would enable a quantum interconnect between microwave and optical quantum systems. We present a platform based on silicon nitride nanomembranes for integrating superconducting microwave circuits with planar acoustic and optical devices such as phononic and photonic crystals. Using planar capacitors with vacuum gaps of 60 nm and spiral inductor coils of micron pitch we realize microwave resonant circuits with large electromechanical coupling to planar acoustic structures of nanoscale dimensions and femtoFarad motional capacitance. Using this enhanced coupling, we demonstrate microwave backaction cooling of the 4.48 MHz mechanical resonance of a nanobeam to an occupancy as low as 0.32. These results indicate the viability of silicon nitride nanomembranes as an all-in-one substrate for quantum electro-opto-mechanical experiments. PMID:27484751

  1. Design and development of a CPW-based 5-bit switched-line phase shifter using inline metal contact MEMS series switches for 17.25 GHz transmit/receive module application

    NASA Astrophysics Data System (ADS)

    Dey, Sukomal; Koul, Shiban K.

    2014-01-01

    A radio frequency micro-electro-mechanical system (RF-MEMS) phase shifter based on switchable delay line concept with maximum desirable phase shift and good reliability is presented in this paper. The phase shifter is based on the switchable reference and delay line configurations with inline metal contact series switches that employs MEMS systems based on electrostatic actuation and implemented using coplanar waveguide (CPW) configuration. Electromechanical behaviour of the MEMS switch has been extensively investigated using commercially available simulation tools and validated using system level simulation. A detailed design and performance analysis of the phase shifter has been carried out as a function of various structural parameters with reference to the gold-based surface micromachining process on alumina substrate. The mechanical, electrical, transient, intermodulation distortion (IMD) and loss performance of an MEMS switch have been experimentally investigated. The individual primary phase-bits (11.25°/22.5°/45°/90°/180°) that are fundamental building blocks of a complete 5-bit phase shifter have been designed, fabricated and experimentally characterized. Furthermore, two different 5-bit switched-line phase shifters, that lead to 25% size reduction and result in marked improvement in the reliability of the complete 5-bit phase shifter with 30 V actuation voltage, have been developed. The performance comparison between two different CPW-based switched-line phase shifters have been extensively investigated and validated. The complete 5-bit phase shifter demonstrates an average insertion loss of 5.4 dB with a return loss of better than 14 dB at 17.25 GHz. The maximum phase error of 1.3° has been obtained at 17.25 GHz from these 5-bit phase shifters.

  2. Monitoring of slope-instabilities and deformations with Micro-Electro-Mechanical-Systems (MEMS) in wireless ad-hoc Sensor Networks

    NASA Astrophysics Data System (ADS)

    Arnhardt, C.; Fernández-Steeger, T. M.; Azzam, R.

    2009-04-01

    In most mountainous regions, landslides represent a major threat to human life, properties and infrastructures. Nowadays existing landslide monitoring systems are often characterized by high efforts in terms of purchase, installation, maintenance, manpower and material. In addition (or because of this) only small areas or selective points of the endangered zone can be observed by the system. Therefore the improvement of existing and the development of new monitoring and warning systems are of high relevance. The joint project "Sensor based Landslide Early Warning Systems" (SLEWS) deals with the development of a prototypic Alarm- and Early Warning system (EWS) for different types of landslides using low-cost micro-sensors (MEMS) integrated in a wireless sensor network (WSN). Modern so called Ad-Hoc, Multi-Hop wireless sensor networks (WSN) are characterized by a self organizing and self-healing capacity of the system (autonomous systems). The network consists of numerous individual and own energy-supply operating sensor nodes, that can send data packages from their measuring devices (here: MEMS) over other nodes (Multi-Hop) to a collection point (gateway). The gateway provides the interface to central processing and data retrieval units (PC, Laptop or server) outside the network. In order to detect and monitor the different landslide processes (like fall, topple, spreading or sliding) 3D MEMS capacitive sensors made from single silicon crystals and glass were chosen to measure acceleration, tilting and altitude changes. Based on the so called MEMS (Micro-Electro-Mechanical Systems) technology, the sensors combine very small mechanical and electronic units, sensing elements and transducers on a small microchip. The mass production of such type of sensors allows low cost applications in different areas (like automobile industries, medicine, and automation technology). Apart from the small and so space saving size and the low costs another advantage is the energy

  3. Nondestructive optical characterization of MEMS

    NASA Astrophysics Data System (ADS)

    Pryputniewicz, Ryszard J.

    2013-10-01

    Advances in emerging technology of microelectromechanical systems (MEMS) are one of the most challenging tasks in today's experimental mechanics. More specifically, development of these miniature devices requires sophisticated design, analysis, fabrication, testing, and characterization tools that have multiphysics and multiscale capabilities, especially as MEMS are being developed for use at harsh conditions. In harsh-environment and high-performance guidance applications inertial sensors must be sensitive to low rates of rotation yet survive the high blast loads associated with the initial launch. In this multi-year study a set of tuning fork gyroscopes (TFGs) were subjected to a series of increasing g-loads (culminating at approximately 60,000 g's) with measurements of shape made after each test. High-g-testing was conducted within the large test chamber using a custom fabricated mini powder gun. A custom set of test sample packages were hermetically sealed with glass lids to allow optical inspection of components while preserving the operating (vacuum) environment. Optical and interferometric measurements have been made prior to and after each shock g-loading. The shape of the TFG test articles was measured using optoelectronic laser interferometric microscope (OELIM) methodology. Line traces were extracted from pertinent structures to clearly examine changes in the TFG. Failure of the die was observed in the form of fractures below the chip surface as well as fractures in the glass lid sealing the package.

  4. The Sandia MEMS passive shock sensor : FY07 maturation activities.

    SciTech Connect

    Houston, Jack E.; Blecke, Jill; Mitchell, John Anthony; Wittwer, Jonathan W.; Crowson, Douglas A.; Clemens, Rebecca C.; Walraven, Jeremy Allen; Epp, David S.; Baker, Michael Sean

    2008-08-01

    This report describes activities conducted in FY07 to mature the MEMS passive shock sensor. The first chapter of the report provides motivation and background on activities that are described in detail in later chapters. The second chapter discusses concepts that are important for integrating the MEMS passive shock sensor into a system. Following these two introductory chapters, the report details modeling and design efforts, packaging, failure analysis and testing and validation. At the end of FY07, the MEMS passive shock sensor was at TRL 4.

  5. Ultra-Low-Power MEMS Selective Gas Sensors

    NASA Technical Reports Server (NTRS)

    Stetter, Joseph

    2012-01-01

    This innovation is a system for gas sensing that includes an ultra-low-power MEMS (microelectromechanical system) gas sensor, combined with unique electronic circuitry and a proprietary algorithm for operating the sensor. The electronics were created from scratch, and represent a novel design capable of low-power operation of the proprietary MEMS gas sensor platform. The algorithm is used to identify a specific target gas in a gas mixture, making the sensor selective to that target gas.

  6. Modeling of dielectric elastomer as electromechanical resonator

    SciTech Connect

    Li, Bo Liu, Lei; Chen, Hualing; Jia, Shuhai; Zhang, Junshi; Li, Dichen

    2014-09-28

    Dielectric elastomers (DEs) feature nonlinear dynamics resulting from an electromechanical coupling. Under alternating voltage, the DE resonates with tunable performances. We present an analysis of the nonlinear dynamics of a DE as electromechanical resonator (DEER) configured as a pure shear actuator. A theoretical model is developed to characterize the complex performance under different boundary conditions. Physical mechanisms are presented and discussed. Chaotic behavior is also predicted, illustrating instabilities in the dynamics. The results provide a guide to the design and application of DEER in haptic devices.

  7. Modeling of dielectric elastomer as electromechanical resonator

    NASA Astrophysics Data System (ADS)

    Li, Bo; Zhang, Junshi; Liu, Lei; Chen, Hualing; Jia, Shuhai; Li, Dichen

    2014-09-01

    Dielectric elastomers (DEs) feature nonlinear dynamics resulting from an electromechanical coupling. Under alternating voltage, the DE resonates with tunable performances. We present an analysis of the nonlinear dynamics of a DE as electromechanical resonator (DEER) configured as a pure shear actuator. A theoretical model is developed to characterize the complex performance under different boundary conditions. Physical mechanisms are presented and discussed. Chaotic behavior is also predicted, illustrating instabilities in the dynamics. The results provide a guide to the design and application of DEER in haptic devices.

  8. Performance Thresholds for Application of MEMS Inertial Sensors in Space

    NASA Technical Reports Server (NTRS)

    Smit, Geoffrey N.

    1995-01-01

    We review types of inertial sensors available and current usage of inertial sensors in space and the performance requirements for these applications. We then assess the performance available from micro-electro-mechanical systems (MEMS) devices, both in the near and far term. Opportunities for the application of these devices are identified. A key point is that although the performance available from MEMS inertial sensors is significantly lower than that achieved by existing macroscopic devices (at least in the near term), the low cost, low size, and power of the MEMS devices opens up a number of applications. In particular, we show that there are substantial benefits to using MEMS devices to provide vibration, and for some missions, attitude sensing. In addition, augmentation for global positioning system (GPS) navigation systems holds much promise.

  9. MEMS Incandescent Light Source

    NASA Technical Reports Server (NTRS)

    Tuma, Margaret; King, Kevin; Kim, Lynn; Hansler, Richard; Jones, Eric; George, Thomas

    2001-01-01

    A MEMS-based, low-power, incandescent light source is being developed. This light source is fabricated using three bonded chips. The bottom chip consists of a reflector on Silicon, the middle chip contains a Tungsten filament bonded to silicon and the top layer is a transparent window. A 25-micrometer-thick spiral filament is fabricated in Tungsten using lithography and wet-etching. A proof-of-concept device has been fabricated and tested in a vacuum chamber. Results indicate that the filament is electrically heated to approximately 2650 K. The power required to drive the proof-of-concept spiral filament to incandescence is 1.25 W. The emitted optical power is expected to be approximately 1.0 W with the spectral peak at 1.1 microns. The micromachining techniques used to fabricate this light source can be applied to other MEMS devices.

  10. An Adaptive Low-Cost GNSS/MEMS-IMU Tightly-Coupled Integration System with Aiding Measurement in a GNSS Signal-Challenged Environment.

    PubMed

    Zhou, Qifan; Zhang, Hai; Li, You; Li, Zheng

    2015-09-18

    The main aim of this paper is to develop a low-cost GNSS/MEMS-IMU tightly-coupled integration system with aiding information that can provide reliable position solutions when the GNSS signal is challenged such that less than four satellites are visible in a harsh environment. To achieve this goal, we introduce an adaptive tightly-coupled integration system with height and heading aiding (ATCA). This approach adopts a novel redundant measurement noise estimation method for an adaptive Kalman filter application and also augments external measurements in the filter to aid the position solutions, as well as uses different filters to deal with various situations. On the one hand, the adaptive Kalman filter makes use of the redundant measurement system's difference sequence to estimate and tune noise variance instead of employing a traditional innovation sequence to avoid coupling with the state vector error. On the other hand, this method uses the external height and heading angle as auxiliary references and establishes a model for the measurement equation in the filter. In the meantime, it also changes the effective filter online based on the number of tracked satellites. These measures have increasingly enhanced the position constraints and the system observability, improved the computational efficiency and have led to a good result. Both simulated and practical experiments have been carried out, and the results demonstrate that the proposed method is effective at limiting the system errors when there are less than four visible satellites, providing a satisfactory navigation solution.

  11. Characterization of glass on electronics in MEMS

    NASA Astrophysics Data System (ADS)

    Patel, Shefali; Delaney, Drew; Xu, DaXue; Murphy, Gene; Denton, Heidi L.; Hughes, Henry G.

    1999-09-01

    Microelectromechanical systems (MEMS) have been around for many years. However, reliability issues, increasing costs, and die sizes are pushing the technology beyond its current capabilities. Integrating a micromachined sensor with its control circuitry on a single piece of silicon offers a cost and a performance advantage over the conventional two chip sensor. The enhancements offered by an integrated MEMS device are leading to many new challenges. The ability to encapsulate the MEMS device without affecting the integrated circuit is a key concern. One method of hermetically sealing the MEMS uses a frit glass which can cause potential damage to the integrated circuit because of the sealing parameters used. In standard CMOS processing, the integrated circuit is not subjected to high temperatures once the devices are built, whereas in wafer level packaging, high temperatures are involved. The high temperatures and the glass composition associated with the sensor capping process could be detrimental to these devices. A test vehicle was developed, therefore, to evaluate the compatibility of the CMOS and the sensor capping processes. The electrical results suggest that the glass and bonding process do not degrade the transistor performance.

  12. Design and control of the precise tracking bed based on complex electromechanical design theory

    NASA Astrophysics Data System (ADS)

    Ren, Changzhi; Liu, Zhao; Wu, Liao; Chen, Ken

    2010-05-01

    The precise tracking technology is wide used in astronomical instruments, satellite tracking and aeronautic test bed. However, the precise ultra low speed tracking drive system is one high integrated electromechanical system, which one complexly electromechanical design method is adopted to improve the efficiency, reliability and quality of the system during the design and manufacture circle. The precise Tracking Bed is one ultra-exact, ultra-low speed, high precision and huge inertial instrument, which some kind of mechanism and environment of the ultra low speed is different from general technology. This paper explores the design process based on complex electromechanical optimizing design theory, one non-PID with a CMAC forward feedback control method is used in the servo system of the precise tracking bed and some simulation results are discussed.

  13. Rigid two-axis MEMS force plate for measuring cellular traction force

    NASA Astrophysics Data System (ADS)

    Takahashi, Hidetoshi; Jung, Uijin G.; Kan, Tetsuo; Tsukagoshi, Takuya; Matsumoto, Kiyoshi; Shimoyama, Isao

    2016-10-01

    Cellular traction force is one of the important factors for understanding cell behaviors, such as spreading, migration and differentiation. Cells are known to change their behavior according to the mechanical stiffness of the environment. However, the measurement of cell traction forces on a rigid environment has remained difficult. This paper reports a micro-electromechanical systems (MEMS) force plate that provides a cellular traction force measurement on a rigid substrate. Both the high force sensitivity and high stiffness of the substrate were obtained using piezoresistive sensing elements. The proposed force plate consists of a 70 µm  ×  15 µm  ×  5 µm base as the substrate for cultivating a bovine aortic smooth muscle cell, and the supporting beams with piezoresistors on the sidewall and the surface were used to measure the forces in both the horizontal and vertical directions. The spring constant and force resolution of the fabricated force plate in the horizontal direction were 0.2 N m-1 and less than 0.05 µN, respectively. The cell traction force was measured, and the traction force increased by approximately 1 µN over 30 min. These results demonstrate that the proposed force plate is applicable as an effective traction force measurement.

  14. Thick SU8 microstructures prepared by broadband UV lithography and the applications in MEMS devices

    NASA Astrophysics Data System (ADS)

    Li, Dong-ling; Wen, Zhi-yu; Shang, Zheng-guo; She, Yin

    2016-05-01

    Thick SU8 microstructures with high aspect ratio and good side wall quality were fabricated by ultraviolet (UV) lithography, and the processing parameters were comprehensively studied. It proves that the adhesion of SU8 on silicon (Si) substrates is influenced by Si-OH on the surface, and can be improved by the HF treatment. Cracks and delamination are caused by large internal stress during fabrication process, and are significantly influenced by soft bake and post-exposure bake processes. The internal stress is reduced by a low post-exposure bake exposure temperature of 85 °C for 40 min. A three-step soft bake enhances the reflowing of SU8 photoresist, and results in uniform surface and less air bubbles. The vertical side wall is obtained with the optimized exposure dose of 800 mJ/cm2 for the thickness of 160 μm. Using the optimized fabrication process combined with a proper structure design, dense SU8 micro pillars are achieved with the aspect ratio of 10 and the taper angle of 89.86°. Finally, some possible applications of SU8 in micro-electromechanical system (MEMS) device are developed and demonstrated.

  15. An Adaptive Low-Cost GNSS/MEMS-IMU Tightly-Coupled Integration System with Aiding Measurement in a GNSS Signal-Challenged Environment

    PubMed Central

    Zhou, Qifan; Zhang, Hai; Li, You; Li, Zheng

    2015-01-01

    The main aim of this paper is to develop a low-cost GNSS/MEMS-IMU tightly-coupled integration system with aiding information that can provide reliable position solutions when the GNSS signal is challenged such that less than four satellites are visible in a harsh environment. To achieve this goal, we introduce an adaptive tightly-coupled integration system with height and heading aiding (ATCA). This approach adopts a novel redundant measurement noise estimation method for an adaptive Kalman filter application and also augments external measurements in the filter to aid the position solutions, as well as uses different filters to deal with various situations. On the one hand, the adaptive Kalman filter makes use of the redundant measurement system’s difference sequence to estimate and tune noise variance instead of employing a traditional innovation sequence to avoid coupling with the state vector error. On the other hand, this method uses the external height and heading angle as auxiliary references and establishes a model for the measurement equation in the filter. In the meantime, it also changes the effective filter online based on the number of tracked satellites. These measures have increasingly enhanced the position constraints and the system observability, improved the computational efficiency and have led to a good result. Both simulated and practical experiments have been carried out, and the results demonstrate that the proposed method is effective at limiting the system errors when there are less than four visible satellites, providing a satisfactory navigation solution. PMID:26393605

  16. High Volume Manufacturing and Field Stability of MEMS Products

    NASA Astrophysics Data System (ADS)

    Martin, Jack

    Low volume MEMS/NEMS production is practical when an attractive concept is implemented with business, manufacturing, packaging, and test support. Moving beyond this to high volume production adds requirements on design, process control, quality, product stability, market size, market maturity, capital investment, and business systems. In a broad sense, this chapter uses a case study approach: It describes and compares the silicon-based MEMS accelerometers, pressure sensors, image projection systems, and gyroscopes that are in high volume production. Although they serve several markets, these businesses have common characteristics. For example, the manufacturing lines use automated semiconductor equipment and standard material sets to make consistent products in large quantities. Standard, well controlled processes are sometimes modified for a MEMS product. However, novel processes that cannot run with standard equipment and material sets are avoided when possible. This reliance on semiconductor tools, as well as the organizational practices required to manufacture clean, particle-free products partially explains why the MEMS market leaders are integrated circuit manufacturers. There are other factors. MEMS and NEMS are enabling technologies, so it can take several years for high volume applications to develop. Indeed, market size is usually a strong function of price. This becomes a vicious circle, because low price requires low cost - a result that is normally achieved only after a product is in high volume production. During the early years, IC companies reduced cost and financial risk by using existing facilities for low volume MEMS production. As a result, product architectures are partially determined by capabilities developed for previous products. This chapter includes a discussion of MEMS product architecture with particular attention to the impact of electronic integration, packaging, and surfaces. Packaging and testing are critical, because they are

  17. High Volume Manufacturing and Field Stability of MEMS Products

    NASA Astrophysics Data System (ADS)

    Martin, Jack

    Low volume MEMS/NEMS production is practical when an attractive concept is implemented with business, manufacturing, packaging, and test support. Moving beyond this to high volume production adds requirements on design, process control, quality, product stability, market size, market maturity, capital investment, and business systems. In a broad sense, this chapter uses a case study approach: It describes and compares the silicon-based MEMS accelerometers, pressure sensors, image projection systems, and gyroscopes that are in high volume production. Although they serve several markets, these businesses have common characteristics. For example, the manufacturing lines use automated semiconductor equipment and standard material sets to make consistent products in large quantities. Standard, well controlled processes are sometimes modified for a MEMS product. However, novel processes that cannot run with standard equipment and material sets are avoided when possible. This reliance on semiconductor tools, as well as the organizational practices required to manufacture clean, particle-free products partially explains why the MEMS market leaders are integrated circuit manufacturers. There are other factors. MEMS and NEMS are enabling technologies, so it can take several years for high volume applications to develop. Indeed, market size is usually a strong function of price. This becomes a vicious circle, because low price requires low cost - a result that is normally achieved only after a product is in high volume production. During the early years, IC companies reduced cost and financial risk by using existing facilities for low volume MEMS production. As a result, product architectures are partially determined by capabilities developed for previous products. This chapter includes a discussion of MEMS product architecture with particular attention to the impact of electronic integration, packaging, and surfaces. Packaging and testing are critical, because they are

  18. Electromechanical actuation for thrust vector control applications

    NASA Astrophysics Data System (ADS)

    Roth, Mary Ellen

    At present, actuation systems for the Thrust Vector Control (TVC) for launch vehicles are hydraulic systems. The Advanced Launch System (ALS), a joint initiative between NASA and the Air Force, is a launch vehicle that is designed to be cost effective, highly reliable and operationally efficient with a goal of reducing the cost per pound to orbit. As part of this initiative, an electromechanical actuation system is being developed as an attractive alternative to the hydraulic systems used today. NASA-Lewis is developing and demonstrating an Induction Motor Controller Actuation System with a 40 hp peak rating. The controller will integrate 20 kHz resonant link Power Management and Distribution (PMAD) technology and Pulse Population Modulation (PPM) techniques to implement Field Oriented Vector Control (FOVC) of a new advanced induction motor. Through PPM, multiphase variable frequency, variable voltage waveforms can be synthesized from the 20 kHz source. FOVC shows that varying both the voltage and frequency and their ratio (V/F), permits independent control of both torque and speed while operating at maximum efficiency at any point on the torque-speed curve. The driver and the FOVC will be microprocessor controlled. For increased system reliability, a Built-in Test (BITE) capability will be included. This involves introducing testability into the design of a system such that testing is calibrated and exercised during the design, manufacturing, maintenance and prelaunch activities. An actuator will be integrated with the motor controller for performance testing of the EMA TVC system. The design and fabrication of the motor controller is being done by General Dynamics Space Systems Division. The University of Wisconsin-Madison will assist in the design of the advanced induction motor and in the implementation of the FOVC theory. A 75 hp electronically controlled dynamometer will be used to test the motor controller in all four quadrants of operation using flight type

  19. Ka-band reliable and compact 3-bit true-time-delay phase shifter using MEMS single-pole-eight-throw switching networks

    NASA Astrophysics Data System (ADS)

    Koul, Shiban K.; Dey, Sukomal; Poddar, Ajay K.; Rohde, Ulrich L.

    2016-10-01

    This paper presents a radio frequency micro-electromechanical system (RF MEMS) based 3-bit phase shifter using MEMS single-pole-eight-throw (SP8T) switches. Devices are fabricated on 635 µm alumina substrate utilizing on the coplanar waveguide (CPW) transmission line. Single switch dimensions are 0.14  ×  0.23 mm2 which is much smaller than Si-on-insulator switches. The symmetric and compact SP8T switch is the primary building block of the 3-bit phase shifter. The SP8T switch results in isolation levels of 31-15 dB, return loss of 33-18 dB and insertion loss of 0.6-1.9 dB, respectively, at 26-40 GHz. Later, two SP8T switches are connected back to back to develop the 3-bit phase shifter using different delay lines at 35 GHz. Finally, the phase shifter provides average return loss of better than 14 dB and average insertion loss of 4.4 dB over the 34.75-35.25 GHz. Measured average phase error is less than 0.98° at 35 GHz. The total area of the fabricated 3-bit phase shifter is 5.95 mm2. SP8T switches are capable of handling 0.1-1 W of power up to 100 million cycles which is sufficient power handling capability for wireless communication systems. Reliability of the phase shifter is extensively characterized with different incident RF powers at room temperature (25°C) and discussed in detail. To the best of the authors’ knowledge, this is the first reported MEMS 3-bit phase shifter in the literature that has used a minimum number of switching elements per phase state.

  20. A Noise Reduction Method for Dual-Mass Micro-Electromechanical Gyroscopes Based on Sample Entropy Empirical Mode Decomposition and Time-Frequency Peak Filtering.

    PubMed

    Shen, Chong; Li, Jie; Zhang, Xiaoming; Shi, Yunbo; Tang, Jun; Cao, Huiliang; Liu, Jun

    2016-01-01

    The different noise components in a dual-mass micro-electromechanical system (MEMS) gyroscope structure is analyzed in this paper, including mechanical-thermal noise (MTN), electronic-thermal noise (ETN), flicker noise (FN) and Coriolis signal in-phase noise (IPN). The structure equivalent electronic model is established, and an improved white Gaussian noise reduction method for dual-mass MEMS gyroscopes is proposed which is based on sample entropy empirical mode decomposition (SEEMD) and time-frequency peak filtering (TFPF). There is a contradiction in TFPS, i.e., selecting a short window length may lead to good preservation of signal amplitude but bad random noise reduction, whereas selecting a long window length may lead to serious attenuation of the signal amplitude but effective random noise reduction. In order to achieve a good tradeoff between valid signal amplitude preservation and random noise reduction, SEEMD is adopted to improve TFPF. Firstly, the original signal is decomposed into intrinsic mode functions (IMFs) by EMD, and the SE of each IMF is calculated in order to classify the numerous IMFs into three different components; then short window TFPF is employed for low frequency component of IMFs, and long window TFPF is employed for high frequency component of IMFs, and the noise component of IMFs is wiped off directly; at last the final signal is obtained after reconstruction. Rotation experimental and temperature experimental are carried out to verify the proposed SEEMD-TFPF algorithm, the verification and comparison results show that the de-noising performance of SEEMD-TFPF is better than that achievable with the traditional wavelet, Kalman filter and fixed window length TFPF methods. PMID:27258276

  1. A Noise Reduction Method for Dual-Mass Micro-Electromechanical Gyroscopes Based on Sample Entropy Empirical Mode Decomposition and Time-Frequency Peak Filtering

    PubMed Central

    Shen, Chong; Li, Jie; Zhang, Xiaoming; Shi, Yunbo; Tang, Jun; Cao, Huiliang; Liu, Jun

    2016-01-01

    The different noise components in a dual-mass micro-electromechanical system (MEMS) gyroscope structure is analyzed in this paper, including mechanical-thermal noise (MTN), electronic-thermal noise (ETN), flicker noise (FN) and Coriolis signal in-phase noise (IPN). The structure equivalent electronic model is established, and an improved white Gaussian noise reduction method for dual-mass MEMS gyroscopes is proposed which is based on sample entropy empirical mode decomposition (SEEMD) and time-frequency peak filtering (TFPF). There is a contradiction in TFPS, i.e., selecting a short window length may lead to good preservation of signal amplitude but bad random noise reduction, whereas selecting a long window length may lead to serious attenuation of the signal amplitude but effective random noise reduction. In order to achieve a good tradeoff between valid signal amplitude preservation and random noise reduction, SEEMD is adopted to improve TFPF. Firstly, the original signal is decomposed into intrinsic mode functions (IMFs) by EMD, and the SE of each IMF is calculated in order to classify the numerous IMFs into three different components; then short window TFPF is employed for low frequency component of IMFs, and long window TFPF is employed for high frequency component of IMFs, and the noise component of IMFs is wiped off directly; at last the final signal is obtained after reconstruction. Rotation experimental and temperature experimental are carried out to verify the proposed SEEMD-TFPF algorithm, the verification and comparison results show that the de-noising performance of SEEMD-TFPF is better than that achievable with the traditional wavelet, Kalman filter and fixed window length TFPF methods. PMID:27258276

  2. Micro- and Nanotechnologies for Intelligent and Responsive Biomaterial-Based Medical Systems

    PubMed Central

    Caldorera-Moore, Mary; Peppas, Nicholas A.

    2009-01-01

    Advances in medical treatments of a wide variety of pathophysiological conditions require the development of better therapeutic agents, as well as a combination of the required therapeutic agents with device-integrated biomaterials that can serve as sensors and carriers. Combination of micro- and nanofabricated systems with intelligent biomaterials that have the ability to sense and respond is a promising avenue for the development of better diagnostic and therapeutic medical systems. Micro- and nano-electromechanical systems (MEMs and NEMs) are now becoming a family of potentially powerful new technologies for drug delivery, diagnostic tools, and tissue engineering. Improvements in micro- and nano-fabrication technology have enhanced the ability to create better performing therapeutic systems for numerous pathophysiological applications. More importantly, MEMS and NEMS-based tissue regeneration scaffolds, biosensors, and drug delivery devices provide new opportunities to mimic the natural intelligence and response of biological systems. PMID:19758574

  3. Cardiac Electromechanical Models: From Cell to Organ

    PubMed Central

    Trayanova, Natalia A.; Rice, John Jeremy

    2011-01-01

    The heart is a multiphysics and multiscale system that has driven the development of the most sophisticated mathematical models at the frontiers of computational physiology and medicine. This review focuses on electromechanical (EM) models of the heart from the molecular level of myofilaments to anatomical models of the organ. Because of the coupling in terms of function and emergent behaviors at each level of biological hierarchy, separation of behaviors at a given scale is difficult. Here, a separation is drawn at the cell level so that the first half addresses subcellular/single-cell models and the second half addresses organ models. At the subcellular level, myofilament models represent actin–myosin interaction and Ca-based activation. The discussion of specific models emphasizes the roles of cooperative mechanisms and sarcomere length dependence of contraction force, considered to be the cellular basis of the Frank–Starling law. A model of electrophysiology and Ca handling can be coupled to a myofilament model to produce an EM cell model, and representative examples are summarized to provide an overview of the progression of the field. The second half of the review covers organ-level models that require solution of the electrical component as a reaction–diffusion system and the mechanical component, in which active tension generated by the myocytes produces deformation of the organ as described by the equations of continuum mechanics. As outlined in the review, different organ-level models have chosen to use different ionic and myofilament models depending on the specific application; this choice has been largely dictated by compromises between model complexity and computational tractability. The review also addresses application areas of EM models such as cardiac resynchronization therapy and the role of mechano-electric coupling in arrhythmias and defibrillation. PMID:21886622

  4. Calibration of High Frequency MEMS Microphones

    NASA Technical Reports Server (NTRS)

    Shams, Qamar A.; Humphreys, William M.; Bartram, Scott M.; Zuckewar, Allan J.

    2007-01-01

    Understanding and controlling aircraft noise is one of the major research topics of the NASA Fundamental Aeronautics Program. One of the measurement technologies used to acquire noise data is the microphone directional array (DA). Traditional direction array hardware, consisting of commercially available condenser microphones and preamplifiers can be too expensive and their installation in hard-walled wind tunnel test sections too complicated. An emerging micro-machining technology coupled with the latest cutting edge technologies for smaller and faster systems have opened the way for development of MEMS microphones. The MEMS microphone devices are available in the market but suffer from certain important shortcomings. Based on early experiments with array prototypes, it has been found that both the bandwidth and the sound pressure level dynamic range of the microphones should be increased significantly to improve the performance and flexibility of the overall array. Thus, in collaboration with an outside MEMS design vendor, NASA Langley modified commercially available MEMS microphone as shown in Figure 1 to meet the new requirements. Coupled with the design of the enhanced MEMS microphones was the development of a new calibration method for simultaneously obtaining the sensitivity and phase response of the devices over their entire broadband frequency range. Over the years, several methods have been used for microphone calibration. Some of the common methods of microphone calibration are Coupler (Reciprocity, Substitution, and Simultaneous), Pistonphone, Electrostatic actuator, and Free-field calibration (Reciprocity, Substitution, and Simultaneous). Traditionally, electrostatic actuators (EA) have been used to characterize air-condenser microphones for wideband frequency ranges; however, MEMS microphones are not adaptable to the EA method due to their construction and very small diaphragm size. Hence a substitution-based, free-field method was developed to

  5. Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry

    NASA Astrophysics Data System (ADS)

    Tapilouw, Abraham Mario; Chen, Liang-Chia; Xuan-Loc, Nguyen; Chen, Jin-Liang

    2014-08-01

    A Micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive industries. However, effective inspection systems are also needed to ensure the functional reliability of MEMS. This study developed a stroboscopic coherence scanning Interferometry (SCSI) technique for measuring key characteristics typically used as criteria in MEMS inspections. Surface profiles of MEMS both static and dynamic conditions were measured by means of coherence scanning Interferometry (CSI). Resonant frequencies of vibrating MEMS were measured by deformation of interferogram fringes for out-of-plane vibration and by image correlation for in-plane vibration. The measurement bandwidth of the developed system can be tuned up to three megahertz or higher for both in-plane and out-of-plane measurement of MEMS.

  6. Electromechanical Technology. Post Secondary Curriculum Guide.

    ERIC Educational Resources Information Center

    Butler, Raymond H.; And Others

    This curriculum guide provides a model for a postsecondary electromechanical technology program. It is divided into 10 sections. Section 1 overviews the philosophy, purpose, and goals for vocational education in Georgia. Contents of section 2 include a definition of the guide's purpose and program objective. Section 3 describes the occupational…

  7. Electromechanical flight control actuator, volume 3

    NASA Technical Reports Server (NTRS)

    1978-01-01

    The design verification tests which were conducted on the electromechanical actuator are described. A description is also given of the power components tests which were conducted to aid in selecting the power transistors for use in the single-channel power electronics breadboard and the results of tests which were conducted on the power electronics breadboard.

  8. Accurate Telescope Mount Positioning with MEMS Accelerometers

    NASA Astrophysics Data System (ADS)

    Mészáros, L.; Jaskó, A.; Pál, A.; Csépány, G.

    2014-08-01

    This paper describes the advantages and challenges of applying microelectromechanical accelerometer systems (MEMS accelerometers) in order to attain precise, accurate, and stateless positioning of telescope mounts. This provides a completely independent method from other forms of electronic, optical, mechanical or magnetic feedback or real-time astrometry. Our goal is to reach the subarcminute range which is considerably smaller than the field-of-view of conventional imaging telescope systems. Here we present how this subarcminute accuracy can be achieved with very cheap MEMS sensors and we also detail how our procedures can be extended in order to attain even finer measurements. In addition, our paper discusses how can a complete system design be implemented in order to be a part of a telescope control system.

  9. MEMS Actuators for Improved Performance and Durability

    NASA Astrophysics Data System (ADS)

    Yearsley, James M.

    Micro-ElectroMechanical Systems (MEMS) devices take advantage of force-scaling at length scales smaller than a millimeter to sense and interact with directly with phenomena and targets at the microscale. MEMS sensors found in everyday devices like cell-phones and cars include accelerometers, gyros, pressure sensors, and magnetic sensors. MEMS actuators generally serve more application specific roles including micro- and nano-tweezers used for single cell manipulation, optical switching and alignment components, and micro combustion engines for high energy density power generation. MEMS rotary motors are actuators that translate an electric drive signal into rotational motion and can serve as rate calibration inputs for gyros, stages for optical components, mixing devices for micro-fluidics, etc. Existing rotary micromotors suffer from friction and wear issues that affect lifetime and performance. Attempts to alleviate friction effects include surface treatment, magnetic and electrostatic levitation, pressurized gas bearings, and micro-ball bearings. The present work demonstrates a droplet based liquid bearing supporting a rotary micromotor that improves the operating characteristics of MEMS rotary motors. The liquid bearing provides wear-free, low-friction, passive alignment between the rotor and stator. Droplets are positioned relative to the rotor and stator through patterned superhydrophobic and hydrophilic surface coatings. The liquid bearing consists of a central droplet that acts as the motor shaft, providing axial alignment between rotor and stator, and satellite droplets, analogous to ball-bearings, that provide tip and tilt stable operation. The liquid bearing friction performance is characterized through measurement of the rotational drag coefficient and minimum starting torque due to stiction and geometric effects. Bearing operational performance is further characterized by modeling and measuring stiffness, environmental survivability, and high

  10. BioMEMS –Advancing the Frontiers of Medicine

    PubMed Central

    James, Teena; Mannoor, Manu Sebastian; Ivanov, Dentcho V.

    2008-01-01

    Biological and medical application of micro-electro-mechanical-systems (MEMS) is currently seen as an area of high potential impact. Integration of biology and microtechnology has resulted in the development of a number of platforms for improving biomedical and pharmaceutical technologies. This review provides a general overview of the applications and the opportunities presented by MEMS in medicine by classifying these platforms according to their applications in the medical field.

  11. A Hazardous Gas Detection System for Aerospace and Commercial Applications

    NASA Technical Reports Server (NTRS)

    Hunter, G. W.; Neudeck, P. G.; Chen, L. - Y.; Makel, D. B.; Liu, C. C.; Wu, Q. H.; Knight, D.

    1998-01-01

    The detection of explosive conditions in aerospace propulsion applications is important for safety and economic reasons. Microfabricated hydrogen, oxygen, and hydrocarbon sensors as well as the accompanying hardware and software are being developed for a range of aerospace safety applications. The development of these sensors is being done using MEMS (Micro ElectroMechanical Systems) based technology and SiC-based semiconductor technology. The hardware and software allows control and interrogation of each sensor head and reduces accompanying cabling through multiplexing. These systems are being applied on the X-33 and on an upcoming STS-95 Shuttle mission. A number of commercial applications are also being pursued. It is concluded that this MEMS-based technology has significant potential to reduce costs and increase safety in a variety of aerospace applications.

  12. A Hazardous Gas Detection System for Aerospace and Commercial Applications

    NASA Technical Reports Server (NTRS)

    Hunter, G. W.; Neudeck, P. G.; Chen, L.-Y.; Makel, D. B.; Liu, C. C.; Wu, Q. H.; Knight, D.

    1998-01-01

    The detection of explosive conditions in aerospace propulsion applications is important for safety and economic reasons. Microfabricated hydrogen, oxygen, and hydrocarbon sensors as well as the accompanying hardware and software are being, developed for a range of aerospace safety applications. The development of these sensors is being done using MEMS (Micro ElectroMechanical Systems) based technology and SiC-based semiconductor technology. The hardware and software allows control and interrocation of each sensor head and reduces accompanying cabling through multiplexing. These systems are being, applied on the X-33 and on an upcoming STS-95 Shuttle mission. A number of commercial applications are also being pursued. It is concluded that this MEMS-based technology has significant potential to reduce costs and increase safety in a variety of aerospace applications.

  13. Towards electromechanical computation: An alternative approach to realize complex logic circuits

    NASA Astrophysics Data System (ADS)

    Hafiz, M. A. A.; Kosuru, L.; Younis, M. I.

    2016-08-01

    Electromechanical computing based on micro/nano resonators has recently attracted significant attention. However, full implementation of this technology has been hindered by the difficulty in realizing complex logic circuits. We report here an alternative approach to realize complex logic circuits based on multiple MEMS resonators. As case studies, we report the construction of a single-bit binary comparator, a single-bit 4-to-2 encoder, and parallel XOR/XNOR and AND/NOT logic gates. Toward this, several microresonators are electrically connected and their resonance frequencies are tuned through an electrothermal modulation scheme. The microresonators operating in the linear regime do not require large excitation forces, and work at room temperature and at modest air pressure. This study demonstrates that by reconfiguring the same basic building block, tunable resonator, several essential complex logic functions can be achieved.

  14. MEMS-IDT-based microaccelerometers and gyroscopes

    NASA Astrophysics Data System (ADS)

    Varadan, Vijay K.; Varadan, Vasundara V.

    1999-09-01

    The integration of MEMS, IDTs and required microelectronics and conformal antenna to realize a hybrid accelerometer and gyroscope device is presented in this paper. The inertial navigation system uses both gyroscopes and accelerometers to measure the state of motion of a target or a missile by sensing the changes in that state caused by accelerations. This unique combination of technologies results in conformal sensors that can be remotely sensed by a RF system with the advantage of no power requirements at the sensor site. The device presented here possess typical advantages of MEM sensors including the additional benefits of robustness, excellent sensitivity, surface conformability, durability and applicability to wireless antenna systems. Compared to conventional ones, these new sensor have no moving mechanical parts ultimately giving rise to inherent robustness and durability. Consequently, there is no electronics to balance or measure the movement of moving structures, which leads to even smaller micro device.

  15. Hydrophobic coatings for MEMS applications

    NASA Astrophysics Data System (ADS)

    Doms, M.; Feindt, H.; Kuipers, W. J.; Shewtanasoontorn, D.; Matar, A. S.; Brinkhues, S.; Welton, R. H.; Mueller, J.

    2008-05-01

    Different kinds of thin-film coatings were investigated with regard to their applicability as hydrophobic coatings for MEMS. The films were deposited onto silicon and borosilicate glass substrates by spincoating of Dyneon™ PTFE and PFA, plasmapolymerization of HMDS-N and C4F8 as well as liquid-phase and vapor-phase coating of SAMs from DDMS, FDTS, FOTS and Geleste Aquaphobe™ CM. The layer properties were analyzed using profilometry, FTIR, SEM and contact angle measurements. Furthermore, the adhesion of the layers to the substrates was determined in an acetone ultrasonic bath. The influence of various deposition process parameters on the properties of the films was investigated. As these layers can be used in microfluidic systems, as water-repellent layers and as anti-stiction coatings, they are suited for versatile fields of application.

  16. Planarization techniques for MEMS: enabling new structures and enhancing manufacturability

    SciTech Connect

    Smith, J.H.

    1996-12-31

    Planarization techniques such as chemical-mechanical polishing (CMP) have emerged as enabling technologies for the manufacturing of multi- level metal interconnects used in high-density Integrated Circuits (IC). An overview of general planarization techniques for MicroElectroMechanical Systems (MEMS) and, in particular, the extension of CMP from sub-micron IC manufacturing to the fabrication of complex surface-micromachined MEMS will be presented. Planarization technique alleviates processing problems associated with fabrication of multi-level polysilicon structures, eliminates design constraints linked with non-planar topography, and provides an avenue for integrating different process technologies. The CMP process and present examples of the use of CMP in fabricating MEMS devices such as microengines, pressure sensors, and proof masses for accelerometers along with its use for monolithically integrating MEMS devices with microelectronics are presented.

  17. Technology development of RF MEMS switches on printed circuit boards

    NASA Astrophysics Data System (ADS)

    Chang, Hung-Pin

    Today, some engineers have shifted their focus on the micro-electro-mechanical system (MEMS) to pursue better technological advancements. Recent development in RF MEMS technologies have lead to superior switch characteristics, i.e., very low insertion loss, very low power requirements, and high isolation comparing to the conventional semiconductor devices. This success has promised the potential of MEMS to revolutionize RF and microwave system implementation for the next generation of communication applications. However, RF MEMS switches integrated monolithically with various RF functional components on the same substrate to create multifunctional and reconfigurable complete communication systems remains to be a challenge research topic due to the concerns of the high cost of packaging process and the high cost of RF matching requirements in module board implementation. Furthermore, the fabrication of most RF MEMS switches requires thickness control and surface planarization of wide metal lines prior to deposition of a metal membrane bridge, which poses a major challenge to manufacturability. To ease the fabrication of RF MEMS switches and to facilitate their integration with other RF components such as antennas, phase delay lines, tunable filters, it is imperative to develop a manufacturable RF MEMS switch technology on a common substrate housing all essential RF components. Development of a novel RF MEMS technology to build a RF MEMS switch and provide a system-level packaging on microwave laminated printed circuit boards (PCBs) are proposed in this dissertation. Two key processes, high-density inductively coupled plasma chemical vapor deposition (HDICP CVD) for low temperature dielectric deposition, and compressive molding planarization (COMP) for the temporary sacrificial polymer planarization have been developed for fabricating RF MEMS switches on PCBs. Several membrane-type capacitive switches have been fabricated showing excellent RF performance and dynamic

  18. (Electro)Mechanical Properties of Olefinic Block Copolymers

    NASA Astrophysics Data System (ADS)

    Spontak, Richard

    2014-03-01

    Conventional styrenic triblock copolymers (SBCs) swollen with a midblock-selective oil have been previously shown to exhibit excellent electromechanical properties as dielectric elastomers. In this class of electroactive polymers, compliant electrodes applied as active areas to opposing surfaces of an elastomer attract each other, and thus compress the elastomer due to the onset of a Maxwell stress, upon application of an external electric field. This isochoric process is accompanied by an increase in lateral area, which yields the electroactuation strain (measuring beyond 300% in SBC systems). Performance parameters such as the Maxwell stress, transverse strain, dielectric breakdown, energy density and electromechanical efficiency are determined directly from the applied electric field and resulting electroactuation strain. In this study, the same principle used to evaluate SBC systems is extended to olefinic block copolymers (OBCs), which can be described as randomly-coupled multiblock copolymers that consist of crystallizable polyethylene hard segments and rubbery poly(ethylene-co-octene) soft segments. Considerations governing the development of a methodology to fabricate electroresponsive OBC systems are first discussed for several OBCs differing in composition and bulk properties. Evidence of electroactuation in selectively-solvated OBC systems is presented and performance metrics measured therefrom are quantitatively compared with dielectric elastomers derived from SBC and related materials.

  19. MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes

    SciTech Connect

    TANNER,DANELLE M.; SMITH,NORMAN F.; IRWIN,LLOYD W.; EATON,WILLIAM P.; HELGESEN,KAREN SUE; CLEMENT,J. JOSEPH; MILLER,WILLIAM M.; MILLER,SAMUEL L.; DUGGER,MICHAEL T.; WALRAVEN,JEREMY A.; PETERSON,KENNETH A.

    2000-01-01

    The burgeoning new technology of Micro-Electro-Mechanical Systems (MEMS) shows great promise in the weapons arena. We can now conceive of micro-gyros, micro-surety systems, and micro-navigators that are extremely small and inexpensive. Do we want to use this new technology in critical applications such as nuclear weapons? This question drove us to understand the reliability and failure mechanisms of silicon surface-micromachined MEMS. Development of a testing infrastructure was a crucial step to perform reliability experiments on MEMS devices and will be reported here. In addition, reliability test structures have been designed and characterized. Many experiments were performed to investigate failure modes and specifically those in different environments (humidity, temperature, shock, vibration, and storage). A predictive reliability model for wear of rubbing surfaces in microengines was developed. The root causes of failure for operating and non-operating MEMS are discussed. The major failure mechanism for operating MEMS was wear of the polysilicon rubbing surfaces. Reliability design rules for future MEMS devices are established.

  20. MEMS/ECD Method for Making Bi(2-x)Sb(x)Te3 Thermoelectric Devices

    NASA Technical Reports Server (NTRS)

    Lim, James; Huang, Chen-Kuo; Ryan, Margaret; Snyder, G. Jeffrey; Herman, Jennifer; Fleurial, Jean-Pierre

    2008-01-01

    A method of fabricating Bi(2-x)Sb(x)Te3-based thermoelectric microdevices involves a combination of (1) techniques used previously in the fabrication of integrated circuits and of microelectromechanical systems (MEMS) and (2) a relatively inexpensive MEMS-oriented electrochemical-deposition (ECD) technique. The present method overcomes the limitations of prior MEMS fabrication techniques and makes it possible to satisfy requirements.

  1. Point-of-care (POC) devices by means of advanced MEMS.

    PubMed

    Karsten, Stanislav L; Tarhan, Mehmet C; Kudo, Lili C; Collard, Dominique; Fujita, Hiroyuki

    2015-12-01

    Microelectromechanical systems (MEMS) have become an invaluable technology to advance the development of point-of-care (POC) devices for diagnostics and sample analyses. MEMS can transform sophisticated methods into compact and cost-effective microdevices that offer numerous advantages at many levels. Such devices include microchannels, microsensors, etc., that have been applied to various miniaturized POC products. Here we discuss some of the recent advances made in the use of MEMS devices for POC applications.

  2. Point-of-care (POC) devices by means of advanced MEMS.

    PubMed

    Karsten, Stanislav L; Tarhan, Mehmet C; Kudo, Lili C; Collard, Dominique; Fujita, Hiroyuki

    2015-12-01

    Microelectromechanical systems (MEMS) have become an invaluable technology to advance the development of point-of-care (POC) devices for diagnostics and sample analyses. MEMS can transform sophisticated methods into compact and cost-effective microdevices that offer numerous advantages at many levels. Such devices include microchannels, microsensors, etc., that have been applied to various miniaturized POC products. Here we discuss some of the recent advances made in the use of MEMS devices for POC applications. PMID:26459443

  3. Electro-mechanical sensing in freestanding monolayered gold nanoparticle membranes

    NASA Astrophysics Data System (ADS)

    Gauvin, M.; Grisolia, J.; Alnasser, T.; Viallet, B.; Xie, S.; Brugger, J.; Ressier, L.

    2016-06-01

    The electro-mechanical sensing properties of freestanding monolayered membranes of dodecanethiol coated 7 nm gold nanoparticles (NPs) are investigated using AFM force spectroscopy and conductive AFM simultaneously. The electrical resistance of the NP membranes increases sensitively with the point-load force applied in the center of the membranes using an AFM tip. Numerical simulations of electronic conduction in a hexagonally close-packed two-dimensional (2D) array of NPs under point load-deformation are carried out on the basis of electronic transport measurements at low temperatures and strain modeling of the NP membranes by finite element analysis. These simulations, supporting AFM-based electro-mechanical measurements, attribute the high strain sensitivity of the monolayered NP membranes to the exponential dependence of the tunnel electron transport in 2D NP arrays on the strain-induced length variation of the interparticle junctions. This work thus evidences a new class of highly sensitive nano-electro-mechanical systems based on freestanding monolayered gold NP membranes.The electro-mechanical sensing properties of freestanding monolayered membranes of dodecanethiol coated 7 nm gold nanoparticles (NPs) are investigated using AFM force spectroscopy and conductive AFM simultaneously. The electrical resistance of the NP membranes increases sensitively with the point-load force applied in the center of the membranes using an AFM tip. Numerical simulations of electronic conduction in a hexagonally close-packed two-dimensional (2D) array of NPs under point load-deformation are carried out on the basis of electronic transport measurements at low temperatures and strain modeling of the NP membranes by finite element analysis. These simulations, supporting AFM-based electro-mechanical measurements, attribute the high strain sensitivity of the monolayered NP membranes to the exponential dependence of the tunnel electron transport in 2D NP arrays on the strain

  4. Mechanism of Electromechanical Coupling in Voltage-Gated Potassium Channels

    PubMed Central

    Blunck, Rikard; Batulan, Zarah

    2012-01-01

    Voltage-gated ion channels play a central role in the generation of action potentials in the nervous system. They are selective for one type of ion – sodium, calcium, or potassium. Voltage-gated ion channels are composed of a central pore that allows ions to pass through the membrane and four peripheral voltage sensing domains that respond to changes in the membrane potential. Upon depolarization, voltage sensors in voltage-gated potassium channels (Kv) undergo conformational changes driven by positive charges in the S4 segment and aided by pairwise electrostatic interactions with the surrounding voltage sensor. Structure-function relations of Kv channels have been investigated in detail, and the resulting models on the movement of the voltage sensors now converge to a consensus; the S4 segment undergoes a combined movement of rotation, tilt, and vertical displacement in order to bring 3–4e+ each through the electric field focused in this region. Nevertheless, the mechanism by which the voltage sensor movement leads to pore opening, the electromechanical coupling, is still not fully understood. Thus, recently, electromechanical coupling in different Kv channels has been investigated with a multitude of techniques including electrophysiology, 3D crystal structures, fluorescence spectroscopy, and molecular dynamics simulations. Evidently, the S4–S5 linker, the covalent link between the voltage sensor and pore, plays a crucial role. The linker transfers the energy from the voltage sensor movement to the pore domain via an interaction with the S6 C-termini, which are pulled open during gating. In addition, other contact regions have been proposed. This review aims to provide (i) an in-depth comparison of the molecular mechanisms of electromechanical coupling in different Kv channels; (ii) insight as to how the voltage sensor and pore domain influence one another; and (iii) theoretical predictions on the movement of the cytosolic face of the Kv channels during

  5. Development of an electromechanical admittance approach for application in the vibration control of intelligent structures

    NASA Astrophysics Data System (ADS)

    Providakis, C. P.; Kontoni, D.-P. N.; Voutetaki, M. E.

    2007-04-01

    The present work considers the possibility of vibration control of a distributed dynamical system, such as flexible plates using local piezoelectric (PZT) actuators/sensors and the electromechanical admittance concept. When PZT actuators bonded on structures are used in active vibration and acoustic control, the desired deformation field in the structure is obtained through the application of localized line forces and moments generated by applying an appropriate electrical field on the outer surfaces of the PZT patches. The electromechanical admittance generated at the electrical terminals of a PZT-driven smart structure is then extracted to synthesize a desired damping performance. This is achieved by a FEM-based minimization of the difference between the computed and the desired electromechanical admittance signature for investigated frequency ranges.

  6. Green design assessment of electromechanical products based on group weighted-AHP

    NASA Astrophysics Data System (ADS)

    Guo, Jinwei; Zhou, MengChu; Li, Zhiwu; Xie, Huiguang

    2015-11-01

    Manufacturing industry is the backbone of a country's economy while environmental pollution is a serious problem that human beings must face today. The green design of electromechanical products based on enterprise information systems is an important method to solve the environmental problem. The question on how to design green products must be answered by excellent designers via both advanced design methods and effective assessment methods of electromechanical products. Making an objective and precise assessment of green design is one of the problems that must be solved when green design is conducted. An assessment method of green design on electromechanical products based on Group Weighted-AHP (Analytic Hierarchy Process) is proposed in this paper, together with the characteristics of green products. The assessment steps of green design are also established. The results are illustrated via the assessment of a refrigerator design.

  7. Evaluation of MEMS-Based Wireless Accelerometer Sensors in Detecting Gear Tooth Faults in Helicopter Transmissions

    NASA Technical Reports Server (NTRS)

    Lewicki, David George; Lambert, Nicholas A.; Wagoner, Robert S.

    2015-01-01

    The diagnostics capability of micro-electro-mechanical systems (MEMS) based rotating accelerometer sensors in detecting gear tooth crack failures in helicopter main-rotor transmissions was evaluated. MEMS sensors were installed on a pre-notched OH-58C spiral-bevel pinion gear. Endurance tests were performed and the gear was run to tooth fracture failure. Results from the MEMS sensor were compared to conventional accelerometers mounted on the transmission housing. Most of the four stationary accelerometers mounted on the gear box housing and most of the CI's used gave indications of failure at the end of the test. The MEMS system performed well and lasted the entire test. All MEMS accelerometers gave an indication of failure at the end of the test. The MEMS systems performed as well, if not better, than the stationary accelerometers mounted on the gear box housing with regards to gear tooth fault detection. For both the MEMS sensors and stationary sensors, the fault detection time was not much sooner than the actual tooth fracture time. The MEMS sensor spectrum data showed large first order shaft frequency sidebands due to the measurement rotating frame of reference. The method of constructing a pseudo tach signal from periodic characteristics of the vibration data was successful in deriving a TSA signal without an actual tach and proved as an effective way to improve fault detection for the MEMS.

  8. COTS MEMS Flow-Measurement Probes

    NASA Technical Reports Server (NTRS)

    Redding, Chip; Smith, Floyd A.; Blank, Greg; Cruzan, Charles

    2004-01-01

    As an alternative to conventional tubing instrumentation for measuring airflow, designers and technicians at Glenn Research Center have been fabricating packaging components and assembling a set of unique probes that contain commercial off-the-shelf (COTS) microelectromechanical systems (MEMS) sensor chips. MEMS sensor chips offer some compelling advantages over standard macroscopic measurement devices. MEMS sensor technology has matured through mass production and use in the automotive and aircraft industries. At present, MEMS are the devices of choice for sensors in such applications as tire-pressure monitors, altimeters, pneumatic controls, cable leak detectors, and consumer appliances. Compactness, minimality of power demand, rugged construction, and moderate cost all contribute to making MEMS sensors attractive for instrumentation for future research. Conventional macroscopic flow-measurement instrumentation includes tubes buried beneath the aerodynamic surfaces of wind-tunnel models or in wind-tunnel walls. Pressure is introduced at the opening of each such tube. The pressure must then travel along the tube before reaching a transducer that generates an electronic signal. The lengths of such tubes typically range from 20 ft (approx.= 6 m) to hundreds of feet (of the order of 100 m). The propagation of pressure signals in the tubes damps the signals considerably and makes it necessary to delay measurements until after test rigs have reached steady-state operation. In contrast, a MEMS pressure sensor that generates electronic output can take readings continuously under dynamic conditions in nearly real time. In order to use stainless-steel tubing for pressure measurements, it is necessary to clean many tubes, cut them to length, carefully install them, delicately deburr them, and splice them. A cluster of a few hundred 1/16-in.- (approx.=1.6-mm-) diameter tubes (such clusters are common in research testing facilities) can be several inches (of the order of 10

  9. Uncertainty quantification in capacitive RF MEMS switches

    NASA Astrophysics Data System (ADS)

    Pax, Benjamin J.

    Development of radio frequency micro electrical-mechanical systems (RF MEMS) has led to novel approaches to implement electrical circuitry. The introduction of capacitive MEMS switches, in particular, has shown promise in low-loss, low-power devices. However, the promise of MEMS switches has not yet been completely realized. RF-MEMS switches are known to fail after only a few months of operation, and nominally similar designs show wide variability in lifetime. Modeling switch operation using nominal or as-designed parameters cannot predict the statistical spread in the number of cycles to failure, and probabilistic methods are necessary. A Bayesian framework for calibration, validation and prediction offers an integrated approach to quantifying the uncertainty in predictions of MEMS switch performance. The objective of this thesis is to use the Bayesian framework to predict the creep-related deflection of the PRISM RF-MEMS switch over several thousand hours of operation. The PRISM switch used in this thesis is the focus of research at Purdue's PRISM center, and is a capacitive contacting RF-MEMS switch. It employs a fixed-fixed nickel membrane which is electrostatically actuated by applying voltage between the membrane and a pull-down electrode. Creep plays a central role in the reliability of this switch. The focus of this thesis is on the creep model, which is calibrated against experimental data measured for a frog-leg varactor fabricated and characterized at Purdue University. Creep plasticity is modeled using plate element theory with electrostatic forces being generated using either parallel plate approximations where appropriate, or solving for the full 3D potential field. For the latter, structure-electrostatics interaction is determined through immersed boundary method. A probabilistic framework using generalized polynomial chaos (gPC) is used to create surrogate models to mitigate the costly full physics simulations, and Bayesian calibration and forward

  10. Ten ways to destroy a prototype MEMS device

    NASA Astrophysics Data System (ADS)

    van der Velden, Stephen; Powlesland, Ian; Singh, Jugdutt

    2011-12-01

    Prototyping a Micro Electro Mechanical System (MEMS) device is a very different process to that employed for a standard Integrated Circuit (IC) or Printed Circuit Board (PCB). While the manufacturing methods for MEMS devices largely derive from the IC industry MEMS present many unique manufacturability challenges. These challenges typically relate to two distinct features, specifically; mechanics of the device and the packaging of the device. This paper discusses some of the potential pitfalls in the manufacture of a MEMS prototype; more specifically the paper considers issues leading to low yield rates in a MEMS prototype developed by the authors and then discusses possible improvements to enable a better chance of success. This discussion first identifies some of the more significant MEMS sensor design features that contributed to a low yield and then presents design improvements that could significantly increase the yield. Following this is the identification of several issues involved in packaging the sensor, which had the effect of reducing the yield further; in this case improvements in the packaging are suggested. Also discussed are some general prototyping problems researchers may face that with careful planning may be avoided.

  11. Enhanced electromechanical coupling of a nanomechanical resonator to coupled superconducting cavities

    PubMed Central

    Li, Peng-Bo; Li, Hong-Rong; Li, Fu-Li

    2016-01-01

    We investigate the electromechanical coupling between a nanomechanical resonator and two parametrically coupled superconducting coplanar waveguide cavities that are driven by a two-mode squeezed microwave source. We show that, with the selective coupling of the resonator to the cavity Bogoliubov modes, the radiation-pressure type coupling can be greatly enhanced by several orders of magnitude, enabling the single photon strong coupling to be reached. This allows the investigation of a number of interesting phenomena such as photon blockade effects and the generation of nonclassical quantum states with electromechanical systems. PMID:26753744

  12. A size-dependent model for beam-like MEMS driven by electrostatic and piezoelectric forces: A variational approach

    NASA Astrophysics Data System (ADS)

    Yin, Tenghao; Wang, Binglei; Zhou, Shenjie; Zhao, Moli

    2016-10-01

    A size-dependent model of a micro-electromechanical system (MEMS) actuated by both electrostatic and piezoelectric forces is proposed based on the modified couple stress. The governing equation and boundary conditions are derived with the help of the Hamilton principle and solved numerically by employing the Galerkin method and Newton downhill method. A material length scale parameter (MLSP) is incorporated in the model to capture the size effect in microstructures. An excellent agreement is found between the results of the present model and the experimental data, providing the validity of this model. The results reveal that the introduction of the MLSP stiffens the system and increases the pull-in voltage. The size-effect is significant when the dimension of the beam is comparable to the MLSP but it becomes smaller as the beam size increases. Besides, the static characteristic of the micro-switch is studied. It is found that the piezoelectric material attached on the beam can reduce the pull-in voltage remarkably, which may guide the design of the micro-structure when the system is on the order of micron or submicron.

  13. Magnetic field control. [electromechanical torquing device

    NASA Technical Reports Server (NTRS)

    Haeussermann, W. (Inventor)

    1982-01-01

    A torque control for an electromechanical torquing device of a type where a variable clearance occurs between a rotor and field is described. A Hall effect device senses the field present, which would vary as a function of spacing between field and rotor. The output of the Hall effect device controls the power applied to the field so as to provide a well defined field and thus a controlled torque to the rotor which is well defined.

  14. Low Voltage MEMS Digital Loudspeaker Array Based on Thin-film PZT Actuators

    NASA Astrophysics Data System (ADS)

    Fanget, S.; Casset, F.; Dejaeger, R.; Maire, F.; Desloges, B.; Deutzer, J.; Morisson, R.; Bohard, Y.; Laroche, B.; Escato, J.; Leclere, Q.

    This paper reports on the development of a Digital Loudspeaker Array (DLA) solution based on Pb(Zr0.52,Ti0.48)O3 (PZT) thin-film actuated membranes. These membranes called speaklets are arranged in a matrix and operate in a binary manner by emitting short pulses of sound pressure. Using the principle of additivity of pressures in the air, it is possible to reconstruct audible sounds. For the first time, electromechanical and acoustic characterizations are reported on a 256-MEMS-membranes DLA. Sounds audible as far as several meters from the loudspeaker have been generated using low voltage (8 V).

  15. Design and application of electromechanical actuators for deep space missions

    NASA Astrophysics Data System (ADS)

    Haskew, Tim A.; Wander, John

    1993-09-01

    The annual report Design and Application of Electromechanical Actuators for Deep Space Missions is presented. The reporting period is 16 Aug. 1992 to 15 Aug. 1993. However, the primary focus will be work performed since submission of our semi-annual progress report in Feb. 1993. Substantial progress was made. We currently feel confident in providing guidelines for motor and control strategy selection in electromechanical actuators to be used in thrust vector control (TVC) applications. A small portion was presented in the semi-annual report. At this point, we have implemented highly detailed simulations of various motor/drive systems. The primary motor candidates were the brushless dc machine, permanent magnet synchronous machine, and the induction machine. The primary control implementations were pulse width modulation and hysteresis current control. Each of the two control strategies were applied to each of the three motor choices. With either pulse width modulation or hysteresis current control, the induction machine was always vector controlled. A standard test position command sequence for system performance evaluation is defined. Currently, we are gathering all of the necessary data for formal presentation of the results. Briefly stated for TVC application, we feel that the brushless dc machine operating under PWM current control is the best option. Substantial details on the topic, with supporting simulation results, will be provided later, in the form of a technical paper prepared for submission and also in the next progress report with more detail than allowed for paper publication.

  16. Electromechanical impedance response of a cracked Timoshenko beam.

    PubMed

    Zhang, Yuxiang; Xu, Fuhou; Chen, Jiazhao; Wu, Cuiqin; Wen, Dongdong

    2011-01-01

    Typically, the Electromechanical Impedance (EMI) technique does not use an analytical model for basic damage identification. However, an accurate model is necessary for getting more information about any damage. In this paper, an EMI model is presented for predicting the electromechanical impedance of a cracked beam structure quantitatively. A coupled system of a cracked Timoshenko beam with a pair of PZT patches bonded on the top and bottom surfaces has been considered, where the bonding layers are assumed as a Kelvin-Voigt material. The shear lag model is introduced to describe the load transfer between the PZT patches and the beam structure. The beam crack is simulated as a massless torsional spring; the dynamic equations of the coupled system are derived, which include the crack information and the inertial forces of both PZT patches and adhesive layers. According to the boundary conditions and continuity conditions, the analytical expression of the admittance of PZT patch is obtained. In the case study, the influences of crack and the inertial forces of PZT patches are analyzed. The results show that: (1) the inertial forces affects significantly in high frequency band; and (2) the use of appropriate frequency range can improve the accuracy of damage identification. PMID:22164017

  17. Electromechanical cardioplasty using a wrapped elasto-conductive epicardial mesh.

    PubMed

    Park, Jinkyung; Choi, Suji; Janardhan, Ajit H; Lee, Se-Yeon; Raut, Samarth; Soares, Joao; Shin, Kwangsoo; Yang, Shixuan; Lee, Chungkeun; Kang, Ki-Woon; Cho, Hye Rim; Kim, Seok Joo; Seo, Pilseon; Hyun, Wonji; Jung, Sungmook; Lee, Hye-Jeong; Lee, Nohyun; Choi, Seung Hong; Sacks, Michael; Lu, Nanshu; Josephson, Mark E; Hyeon, Taeghwan; Kim, Dae-Hyeong; Hwang, Hye Jin

    2016-06-22

    Heart failure remains a major public health concern with a 5-year mortality rate higher than that of most cancers. Myocardial disease in heart failure is frequently accompanied by impairment of the specialized electrical conduction system and myocardium. We introduce an epicardial mesh made of electrically conductive and mechanically elastic material, to resemble the innate cardiac tissue and confer cardiac conduction system function, to enable electromechanical cardioplasty. Our epicardium-like substrate mechanically integrated with the heart and acted as a structural element of cardiac chambers. The epicardial device was designed with elastic properties nearly identical to the epicardial tissue itself and was able to detect electrical signals reliably on the moving rat heart without impeding diastolic function 8 weeks after induced myocardial infarction. Synchronized electrical stimulation over the ventricles by the epicardial mesh with the high conductivity of 11,210 S/cm shortened total ventricular activation time, reduced inherent wall stress, and improved several measures of systolic function including increases of 51% in fractional shortening, ~90% in radial strain, and 42% in contractility. The epicardial mesh was also capable of delivering an electrical shock to terminate a ventricular tachyarrhythmia in rodents. Electromechanical cardioplasty using an epicardial mesh is a new pathway toward reconstruction of the cardiac tissue and its specialized functions. PMID:27334261

  18. Design and application of electromechanical actuators for deep space missions

    NASA Technical Reports Server (NTRS)

    Haskew, Tim A.; Wander, John

    1993-01-01

    The annual report Design and Application of Electromechanical Actuators for Deep Space Missions is presented. The reporting period is 16 Aug. 1992 to 15 Aug. 1993. However, the primary focus will be work performed since submission of our semi-annual progress report in Feb. 1993. Substantial progress was made. We currently feel confident in providing guidelines for motor and control strategy selection in electromechanical actuators to be used in thrust vector control (TVC) applications. A small portion was presented in the semi-annual report. At this point, we have implemented highly detailed simulations of various motor/drive systems. The primary motor candidates were the brushless dc machine, permanent magnet synchronous machine, and the induction machine. The primary control implementations were pulse width modulation and hysteresis current control. Each of the two control strategies were applied to each of the three motor choices. With either pulse width modulation or hysteresis current control, the induction machine was always vector controlled. A standard test position command sequence for system performance evaluation is defined. Currently, we are gathering all of the necessary data for formal presentation of the results. Briefly stated for TVC application, we feel that the brushless dc machine operating under PWM current control is the best option. Substantial details on the topic, with supporting simulation results, will be provided later, in the form of a technical paper prepared for submission and also in the next progress report with more detail than allowed for paper publication.

  19. A methodology for identification and control of electro-mechanical actuators

    PubMed Central

    Tutunji, Tarek A.; Saleem, Ashraf

    2015-01-01

    Mechatronic systems are fully-integrated engineering systems that are composed of mechanical, electronic, and computer control sub-systems. These integrated systems use electro-mechanical actuators to cause the required motion. Therefore, the design of appropriate controllers for these actuators are an essential step in mechatronic system design. In this paper, a three-stage methodology for real-time identification and control of electro-mechanical actuator plants is presented, tested, and validated. First, identification models are constructed from experimental data to approximate the plants’ response. Second, the identified model is used in a simulation environment for the purpose of designing a suitable controller. Finally, the designed controller is applied and tested on the real plant through Hardware-in-the-Loop (HIL) environment. The described three-stage methodology provides the following practical contributions: • Establishes an easy-to-follow methodology for controller design of electro-mechanical actuators. • Combines off-line and on-line controller design for practical performance. • Modifies the HIL concept by using physical plants with computer control (rather than virtual plants with physical controllers). Simulated and experimental results for two case studies, induction motor and vehicle drive system, are presented in order to validate the proposed methodology. These results showed that electromechanical actuators can be identified and controlled using an easy-to-duplicate and flexible procedure. PMID:26150992

  20. A methodology for identification and control of electro-mechanical actuators.

    PubMed

    Tutunji, Tarek A; Saleem, Ashraf

    2015-01-01

    Mechatronic systems are fully-integrated engineering systems that are composed of mechanical, electronic, and computer control sub-systems. These integrated systems use electro-mechanical actuators to cause the required motion. Therefore, the design of appropriate controllers for these actuators are an essential step in mechatronic system design. In this paper, a three-stage methodology for real-time identification and control of electro-mechanical actuator plants is presented, tested, and validated. First, identification models are constructed from experimental data to approximate the plants' response. Second, the identified model is used in a simulation environment for the purpose of designing a suitable controller. Finally, the designed controller is applied and tested on the real plant through Hardware-in-the-Loop (HIL) environment. The described three-stage methodology provides the following practical contributions: •Establishes an easy-to-follow methodology for controller design of electro-mechanical actuators.•Combines off-line and on-line controller design for practical performance.•Modifies the HIL concept by using physical plants with computer control (rather than virtual plants with physical controllers). Simulated and experimental results for two case studies, induction motor and vehicle drive system, are presented in order to validate the proposed methodology. These results showed that electromechanical actuators can be identified and controlled using an easy-to-duplicate and flexible procedure. PMID:26150992