Estimation of resist sensitivity for extreme ultraviolet lithography using an electron beam

DOE Office of Scientific and Technical Information (OSTI.GOV)

Oyama, Tomoko Gowa, E-mail: ohyama.tomoko@qst.go.jp; Oshima, Akihiro; Tagawa, Seiichi, E-mail: tagawa@sanken.osaka-u.ac.jp

2016-08-15

It is a challenge to obtain sufficient extreme ultraviolet (EUV) exposure time for fundamental research on developing a new class of high sensitivity resists for extreme ultraviolet lithography (EUVL) because there are few EUV exposure tools that are very expensive. In this paper, we introduce an easy method for predicting EUV resist sensitivity by using conventional electron beam (EB) sources. If the chemical reactions induced by two ionizing sources (EB and EUV) are the same, the required absorbed energies corresponding to each required exposure dose (sensitivity) for the EB and EUV would be almost equivalent. Based on this theory, wemore » calculated the resist sensitivities for the EUV/soft X-ray region. The estimated sensitivities were found to be comparable to the experimentally obtained sensitivities. It was concluded that EB is a very useful exposure tool that accelerates the development of new resists and sensitivity enhancement processes for 13.5 nm EUVL and 6.x nm beyond-EUVL (BEUVL).« less

Enhancement of conversion efficiency of extreme ultraviolet radiation from a liquid aqueous solution microjet target by use of dual laser pulses

NASA Astrophysics Data System (ADS)

Higashiguchi, Takeshi; Dojyo, Naoto; Hamada, Masaya; Kawasaki, Keita; Sasaki, Wataru; Kubodera, Shoichi

2006-03-01

We demonstrated a debris-free, efficient laser-produced plasma extreme ultraviolet (EUV) source by use of a regenerative liquid microjet target containing tin-dioxide (SnO II) nano-particles. By using a low SnO II concentration (6%) solution and dual laser pulses for the plasma control, we observed the EUV conversion efficiency of 1.2% with undetectable debris.

Extremely Luminous Far-infrared Sources (ELFS)

NASA Technical Reports Server (NTRS)

Harwit, Martin; Houck, James R.; Soifer, B. Thomas; Palumbo, Giorgio G. C.

1987-01-01

The Infrared Astronomical Satellite (IRAS) survey uncovered a class of Extremely Luminous Far Infrared Sources (ELFS), exhibiting luminosities up to and occasionally exceeding 10 to the 12th power L sub 0. Arguments are presented to show that sources with luminosities L equal to or greater than 3 x 10 to the 10th power L sub 0 may represent gas rich galaxies in collision. The more conventional explanation of these sources as sites of extremely active star formation fails to explain the observed low optical luminosities of ELFS as well as their high infrared excess. In contrast, a collisional model heats gas to a temperature of approx. 10 to the 6th power K where cooling takes place in the extreme ultraviolet. The UV is absorbed by dust and converted into far infrared radiation (FIR) without generation of appreciable optical luminosity. Gas recombination as it cools generates a Lyman alpha photon only once for every two extreme ultraviolet approx. 50eV photons emitted by the 10 to the 6th power gas. That accounts for the high infrared excess. Finally, the model also is able to explain the observed luminosity distribution of ELFS as well as many other traits.

A Penning discharge source for extreme ultraviolet calibration

NASA Technical Reports Server (NTRS)

Finley, David S.; Jelinsky, Patrick; Bowyer, Stuart; Malina, Roger F.

1986-01-01

A Penning discharge lamp for use in the calibration of instruments and components for the extreme ultraviolet has been developed. This source is sufficiently light and compact to make it suitable for mounting on the movable slit assembly of a grazing incidence Rowland circle monochromator. Because this is a continuous discharge source, it is suitable for use with photon counting detectors. Line radiation is provided both by the gas and by atoms sputtered off the interchangeable metal cathodes. Usable lines are produced by species as highly ionized as Ne IV and Al V. The wavelength coverage provided is such that a good density of emission lines is available down to wavelengths as short as 100A. This source fills the gap between 100 and 300A, which is inadequately covered by the other available compact continuous radiation sources.

Development of a liquid tin microjet target for an efficient laser-produced plasma extreme ultraviolet source.

PubMed

Higashiguchi, Takeshi; Hamada, Masaya; Kubodera, Shoichi

2007-03-01

A regenerative tin liquid microjet target was developed for a high average power extreme ultraviolet (EUV) source. The diameter of the target was smaller than 160 microm and good vacuum lower than 0.5 Pa was maintained during the operation. A maximum EUV conversion efficiency of 1.8% at the Nd:yttrium-aluminum-garnet laser intensity of around 2 x 10(11) Wcm(2) with a spot diameter of 175 microm (full width at half maximum) was observed. The angular distribution of the EUV emission remained almost isotropic, whereas suprathermal ions mainly emerged toward the target normal.

Development of a liquid tin microjet target for an efficient laser-produced plasma extreme ultraviolet source

NASA Astrophysics Data System (ADS)

Higashiguchi, Takeshi; Hamada, Masaya; Kubodera, Shoichi

2007-03-01

A regenerative tin liquid microjet target was developed for a high average power extreme ultraviolet (EUV) source. The diameter of the target was smaller than 160 μm and good vacuum lower than 0.5 Pa was maintained during the operation. A maximum EUV conversion efficiency of 1.8% at the Nd:yttrium-aluminum-garnet laser intensity of around 2×1011 W/cm2 with a spot diameter of 175 μm (full width at half maximum) was observed. The angular distribution of the EUV emission remained almost isotropic, whereas suprathermal ions mainly emerged toward the target normal.

Damage of multilayer optics with varying capping layers induced by focused extreme ultraviolet beam

DOE Office of Scientific and Technical Information (OSTI.GOV)

Jody Corso, Alain; Nicolosi, Piergiorgio; Nardello, Marco

2013-05-28

Extreme ultraviolet Mo/Si multilayers protected by capping layers of different materials were exposed to 13.5 nm plasma source radiation generated with a table-top laser to study the irradiation damage mechanism. Morphology of single-shot damaged areas has been analyzed by means of atomic force microscopy. Threshold fluences were evaluated for each type of sample in order to determine the capability of the capping layer to protect the structure underneath.

Expected scientific performance of the three spectrometers on the extreme ultraviolet explorer

NASA Technical Reports Server (NTRS)

Vallerga, J. V.; Jelinsky, P.; Vedder, P. W.; Malina, R. F.

1990-01-01

The expected in-orbit performance of the three spectrometers included on the Extreme Ultraviolet Explorer astronomical satellite is presented. Recent calibrations of the gratings, mirrors and detectors using monochromatic and continuum EUV light sources allow the calculation of the spectral resolution and throughput of the instrument. An effective area range of 0.2 to 2.8 sq cm is achieved over the wavelength range 70-600 A with a peak spectral resolution (FWHM) of 360 assuming a spacecraft pointing knowledge of 10 arc seconds (FWHM). For a 40,000 sec observation, the average 3 sigma sensitivity to a monochromatic line source is 0.003 photons/sq cm s. Simulated observations of known classes of EUV sources, such as hot white dwarfs, and cataclysmic variables are also presented.

Cluster beam targets for laser plasma extreme ultraviolet and soft x-ray sources

DOEpatents

Kublak, G.D.; Richardson, M.C.

1996-11-19

Method and apparatus for producing extreme ultraviolet (EUV) and soft x-ray radiation from an ultra-low debris plasma source are disclosed. Targets are produced by the free jet expansion of various gases through a temperature controlled nozzle to form molecular clusters. These target clusters are subsequently irradiated with commercially available lasers of moderate intensity (10{sup 11}--10{sup 12} watts/cm{sup 2}) to produce a plasma radiating in the region of 0.5 to 100 nanometers. By appropriate adjustment of the experimental conditions the laser focus can be moved 10--30 mm from the nozzle thereby eliminating debris produced by plasma erosion of the nozzle. 5 figs.

Serendipitous EUV sources detected during the first year of the Extreme Ultraviolet Explorer right angle program

NASA Technical Reports Server (NTRS)

Mcdonald, K.; Craig, N.; Sirk, M. M.; Drake, J. J.; Fruscione, A.; Vallerga, J. V.; Malina, R. F.

1994-01-01

We report the detection of 114 extreme ultraviolet (EUV; 58 - 740 A) sources, of which 99 are new serendipitous sources, based on observations made with the imaging telescopes on board the Extreme Ultraviolet Explorer (EUVE) during the Right Angle Program (RAP). These data were obtained using the survey scanners and the Deep Survey instrument during the first year of the spectroscopic guest observer phase of the mission, from January 1993 to January 1994. The data set consists of 162 discrete pointings whose exposure times are typically two orders of magnitude longer than the average exposure times during the EUVE all-sky survey. Based on these results, we can expect that EUVE will serendipitously detect approximately 100 new EUV sources per year, or about one new EUV source per 10 sq deg, during the guest observer phase of the EUVE mission. New EUVE sources of note include one B star and three extragalactic objects. The B star (HR 2875, EUVE J0729 - 38.7) is detected in both the Lexan/B (approximately 100 A) and Al/Ti/C (approximately 200 A) bandpasses, and the detection is shown not to be a result of UV leaks. We suggest that we are detecting EUV and/or soft x rays from a companion to the B star. Three sources, EUVE J2132+10.1, EUVE J2343-14.9, and EUVE J2359-30.6 are identified as the active galactic nuclei MKN 1513, MS2340.9-1511, and 1H2354-315, respectively.

Application of Laser Plasma Sources of Soft X-rays and Extreme Ultraviolet (EUV) in Imaging, Processing Materials and Photoionization Studies

NASA Astrophysics Data System (ADS)

Fiedorowicz, H.; Bartnik, A.; Wachulak, P. W.; Jarocki, R.; Kostecki, J.; Szczurek, M.; Ahad, I. U.; Fok, T.; Szczurek, A.; Wȩgrzyński, Ł.

In the paper we present new applications of laser plasma sources of soft X-rays and extreme ultraviolet (EUV) in various areas of plasma physics, nanotechnology and biomedical engineering. The sources are based on a gas puff target irradiated with nanosecond laser pulses from commercial Nd: YAG lasers, generating pulses with time duration from 1 to 10 ns and energies from 0.5 to 10 J at a 10 Hz repetition rate. The targets are produced with the use of a double valve system equipped with a special nozzle to form a double-stream gas puff target which allows for high conversion efficiency of laser energy into soft X-rays and EUV without degradation of the nozzle. The sources are equipped with various optical systems to collect soft X-ray and EUV radiation and form the radiation beam. New applications of these sources in imaging, including EUV tomography and soft X-ray microscopy, processing of materials and photoionization studies are presented.

High-efficiency collector design for extreme-ultraviolet and x-ray applications.

PubMed

Zocchi, Fabio E

2006-12-10

A design of a two-reflection mirror for nested grazing-incidence optics is proposed in which maximum overall reflectivity is achieved by making the two grazing-incidence angles equal for each ray. The design is proposed mainly for application to nonimaging collector optics for extreme-ultraviolet microlithography where the radiation emitted from a hot plasma source needs to be collected and focused on the illuminator optics. For completeness, the design of a double- reflection mirror with equal reflection angles is also briefly outlined for the case of an object at infinity for possible use in x-ray applications.

Diffractive shear interferometry for extreme ultraviolet high-resolution lensless imaging

NASA Astrophysics Data System (ADS)

Jansen, G. S. M.; de Beurs, A.; Liu, X.; Eikema, K. S. E.; Witte, S.

2018-05-01

We demonstrate a novel imaging approach and associated reconstruction algorithm for far-field coherent diffractive imaging, based on the measurement of a pair of laterally sheared diffraction patterns. The differential phase profile retrieved from such a measurement leads to improved reconstruction accuracy, increased robustness against noise, and faster convergence compared to traditional coherent diffractive imaging methods. We measure laterally sheared diffraction patterns using Fourier-transform spectroscopy with two phase-locked pulse pairs from a high harmonic source. Using this approach, we demonstrate spectrally resolved imaging at extreme ultraviolet wavelengths between 28 and 35 nm.

Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers

NASA Astrophysics Data System (ADS)

Li, W.; Urbanski, L.; Marconi, M. C.

2015-12-01

Compact (table top) lasers emitting at wavelengths below 50 nm had expanded the spectrum of applications in the extreme ultraviolet (EUV). Among them, the high-flux, highly coherent laser sources enabled lithographic approaches with distinctive characteristics. In this review, we will describe the implementation of a compact EUV lithography system capable of printing features with sub-50 nm resolution using Talbot imaging. This compact system is capable of producing consistent defect-free samples in a reliable and effective manner. Examples of different patterns and structures fabricated with this method will be presented.

Laser-plasma extreme ultraviolet and soft X-ray sources based on a double stream gas puff target: interaction of the radiation pulses with matter

NASA Astrophysics Data System (ADS)

Bartnik, A.

2015-06-01

In this work a review of investigations concerning interaction of intense extreme ultraviolet (EUV) and soft X-ray (SXR) pulses with matter is presented. The investigations were performed using laser-produced plasma (LPP) EUV/SXR sources based on a double stream gas puff target. The sources are equipped with dedicated collectors allowing for efficient focusing of the EUV/SXR radiation pulses. Intense radiation in a wide spectral range, as well as a quasi-monochromatic radiation can be produced. In the paper different kinds of LPP EUV/SXR sources developed in the Institute of Optoelectronics, Military University of Technology are described. Radiation intensities delivered by the sources are sufficient for different kinds of interaction experiments including EUV/SXR induced ablation, surface treatment, EUV fluorescence or photoionized plasma creation. A brief review of the main results concerning this kind of experiments performed by author of the paper are presented. However, since the LPP sources cannot compete with large scale X-ray sources like synchrotrons, free electron lasers or high energy density plasma sources, it was indicated that some investigations not requiring extreme irradiation parameters can be performed using the small scale installations. Some results, especially concerning low temperature photoionized plasmas are very unique and could be hardly obtained using the large facilities.

XUV generation from the interaction of pico- and nanosecond laser pulses with nanostructured targets

NASA Astrophysics Data System (ADS)

Barte, Ellie Floyd; Lokasani, Ragava; Proska, Jan; Stolcova, Lucie; Maguire, Oisin; Kos, Domagoj; Sheridan, Paul; O'Reilly, Fergal; Sokell, Emma; McCormack, Tom; O'Sullivan, Gerry; Dunne, Padraig; Limpouch, Jiri

2017-05-01

Laser-produced plasmas are intense sources of XUV radiation that can be suitable for different applications such as extreme ultraviolet lithography, beyond extreme ultraviolet lithography and water window imaging. In particular, much work has focused on the use of tin plasmas for extreme ultraviolet lithography at 13.5 nm. We have investigated the spectral behavior of the laser produced plasmas formed on closely packed polystyrene microspheres and porous alumina targets covered by a thin tin layer in the spectral region from 2.5 to 16 nm. Nd:YAG lasers delivering pulses of 170 ps (Ekspla SL312P )and 7 ns (Continuum Surelite) duration were focused onto the nanostructured targets coated with tin. The intensity dependence of the recorded spectra was studied; the conversion efficiency (CE) of laser energy into the emission in the 13.5 nm spectral region was estimated. We have observed an increase in CE using high intensity 170 ps Nd:YAG laser pulses as compared with a 7 ns pulse.

Modeling of thermomechanical changes of extreme-ultraviolet mask and their dependence on absorber variation

NASA Astrophysics Data System (ADS)

Ban, Chung-Hyun; Park, Eun-Sang; Park, Jae-Hun; Oh, Hye-Keun

2018-06-01

Thermal and structural deformation of extreme-ultraviolet lithography (EUVL) masks during the exposure process may become important issues as these masks are subject to rigorous image placement and flatness requirements. The reflective masks used for EUVL absorb energy during exposure, and the temperature of the masks rises as a result. This can cause thermomechanical deformation that can reduce the pattern quality. The use of very thick low-thermal-expansion substrate materials (LTEMs) may reduce energy absorption, but they do not completely eliminate mask deformation. Therefore, it is necessary to predict and optimize the effects of energy transferred from the extreme-ultraviolet (EUV) light source and the resultant patterns of structured EUV masks with complex multilayers. Our study shows that heat accumulates in the masks as exposure progresses. It has been found that a higher absorber ratio (pattern density) applied to the patterning of EUV masks exacerbates the problem, especially in masks with more complex patterns.

Imaging performance improvement of coherent extreme-ultraviolet scatterometry microscope with high-harmonic-generation extreme-ultraviolet source

NASA Astrophysics Data System (ADS)

Mamezaki, Daiki; Harada, Tetsuo; Nagata, Yutaka; Watanabe, Takeo

2017-06-01

In extreme-ultraviolet (EUV) lithography, the development of a review apparatus for the EUV mask pattern at an exposure wavelength of 13.5 nm is required. The EUV mask is composed of an absorber pattern and a Mo/Si multilayer on a glass substrate. This mask pattern has a three-dimensional (3D) structure. The 3D structure would modulate the EUV reflection phase, which would cause focus and pattern shifts. Thus, the review of the EUV phase image is also important. We have developed a coherent EUV scatterometry microscope (CSM), which is a simple microscope without objective optics. The EUV phase and intensity images were reconstructed with diffraction images by ptychography. For a standalone mask review, the high-harmonic-generation (HHG) EUV source was employed. In this study, we updated the sample stage, pump-laser reduction system, and gas-pressure control system to reconstruct the image. As a result, an 88 nm line-and-space pattern and a cross-line pattern were reconstructed. In addition, a particle defect of 2 µm diameter was well reconstructed. This demonstrated the high capability of the standalone CSM, which can hence be used in factories, such as mask shops and semiconductor fabrication plants.

Harmonium: A pulse preserving source of monochromatic extreme ultraviolet (30-110 eV) radiation for ultrafast photoelectron spectroscopy of liquids.

PubMed

Ojeda, J; Arrell, C A; Grilj, J; Frassetto, F; Mewes, L; Zhang, H; van Mourik, F; Poletto, L; Chergui, M

2016-03-01

A tuneable repetition rate extreme ultraviolet source (Harmonium) for time resolved photoelectron spectroscopy of liquids is presented. High harmonic generation produces 30-110 eV photons, with fluxes ranging from ∼2 × 10(11) photons/s at 36 eV to ∼2 × 10(8) photons/s at 100 eV. Four different gratings in a time-preserving grating monochromator provide either high energy resolution (0.2 eV) or high temporal resolution (40 fs) between 30 and 110 eV. Laser assisted photoemission was used to measure the temporal response of the system. Vibrational progressions in gas phase water were measured demonstrating the ∼0.2 eV energy resolution.

Laser waveform control of extreme ultraviolet high harmonics from solids.

PubMed

You, Yong Sing; Wu, Mengxi; Yin, Yanchun; Chew, Andrew; Ren, Xiaoming; Gholam-Mirzaei, Shima; Browne, Dana A; Chini, Michael; Chang, Zenghu; Schafer, Kenneth J; Gaarde, Mette B; Ghimire, Shambhu

2017-05-01

Solid-state high-harmonic sources offer the possibility of compact, high-repetition-rate attosecond light emitters. However, the time structure of high harmonics must be characterized at the sub-cycle level. We use strong two-cycle laser pulses to directly control the time-dependent nonlinear current in single-crystal MgO, leading to the generation of extreme ultraviolet harmonics. We find that harmonics are delayed with respect to each other, yielding an atto-chirp, the value of which depends on the laser field strength. Our results provide the foundation for attosecond pulse metrology based on solid-state harmonics and a new approach to studying sub-cycle dynamics in solids.

An overview of the extreme ultraviolet explorer and its scientific program

NASA Technical Reports Server (NTRS)

Malina, Roger F.; Finley, David S.; Jelinsky, Patrick; Vallerga, John; Bowyer, Stuart

1987-01-01

NASA's Extreme Ultraviolet Explorer (EUVE) will carry out an all-sky survey from 8 to 90 nm in four bandpasses; the limiting sensitivity will be between 2 to 3 orders of magnitude fainter than the hot white dwarf HZ 43. A deep survey will also be carried out along the ecliptic which will have a limiting sensitivity of 1 to 2 orders of magnitude fainter than the all-sky survey in the bandpass from 8 to 50 nm. The payload also includes a spectrometer which will be used to observe the brighter sources found in the surveys with a spectral resolution of 1 to 2 A.

A volume-limited survey of High Galactic latitude planetary nebulae with the Extrme Ultraviolet Explorer

NASA Technical Reports Server (NTRS)

Fruscione, Antonella; Drake, Jeremy J.; Mcdonald, Kelley; Malina, Roger F.

1995-01-01

We present the results of a complete survey, at extreme-ultraviolet (EUV) wavelengths (58-234 A), of the high Galactic latitude (absolute value of b greater than or = to 20 deg) planetary nebulae (PNs) with at least one determination of the distance within 1 kpc of the Sun. The sample comprises 27 objects observed during the Extreme Ultraviolet Explorer (EUVE) all-sky survey and represents the majority of PN likely to be accessible at EUV wavelengths. Six PNs (NGC 246, NGC 1360, K1-16, LoTr 5, NGC 4361, and NGC 3587) were detected in the shortest EUV band (58-174 A). A seventh PN (NGC 6853), not included in the sample, was also detected during the survey. The emission is consistent in all cases with that of a point source and therefore most probably originates from the PN central star. Accurate EUV count rates or upper limits in the two shorter EUVE bands (centered at approximately 100 and 200 A) are given for all the sources in the sample. NGC 4361 and NGC 3587 are reported here for the first time as sources of EUV radiation. As might be expected, attenuation by the interstellar medium dominates the PN distribution in the EUV sky.

Nanoscale imaging with table-top coherent extreme ultraviolet source based on high harmonic generation

NASA Astrophysics Data System (ADS)

Ba Dinh, Khuong; Le, Hoang Vu; Hannaford, Peter; Van Dao, Lap

2017-08-01

A table-top coherent diffractive imaging experiment on a sample with biological-like characteristics using a focused narrow-bandwidth high harmonic source around 30 nm is performed. An approach involving a beam stop and a new reconstruction algorithm to enhance the quality of reconstructed the image is described.

Particle and chemical control using tunnel flow

DOE Office of Scientific and Technical Information (OSTI.GOV)

Chilese, Frank; Delgado, Gildardo R.; Wack, Daniel

An apparatus for contaminant control, having: a first optical assembly including: a first light homogenizer tunnel with: a first end connected to an extreme ultra-violet light source, a second end in communication with a destination chamber, a first enclosed space, and, a first gas input arranged to introduce a first gas such that the first gas flows in a first direction toward the first end and in a second direction toward the second end. The apparatus alternately having: a second optical assembly including: a second light homogenizer tunnel with: a third end connected to an extreme ultra-violet light source, amore » fourth end in communication with a destination chamber, a second enclosed space, a diffusion barrier tube including: a fifth end facing the fourth end and a sixth end in communication with a destination chamber, and a second gas input between the second light homogenizer tunnel and the diffusion tube.« less

The Extreme Ultraviolet Explorer mission

NASA Technical Reports Server (NTRS)

Malina, R. F.; Battel, S. J.

1989-01-01

The Extreme Ultraviolet Explorer (EUVE) mission will be the first user of NASA's new Explorer platform. The instrumentation included on this mission consists of three grazing incidence scanning telescopes, a deep survey instrument and an EUV spectrometer. The bandpass covered is 80 to 900 A. During the first six months of the mission, the scanning telescopes will be used to make all-sky maps in four bandpasses; astronomical sources wil be detected and their positions determined to an accuracy of 0.1 deg. The deep survey instrument will survey the sky with higher sensitivity along the ecliptic in two bandpasses between 80 and 500 A. Engineering and design aspects of the science payload and features of the instrument design are described.

Global Ultraviolet Imager (GUVI) investigation

NASA Technical Reports Server (NTRS)

Christensen, Andrew B.

1995-01-01

This report covers the activities performed under NAS5-32572. The results of those activities are included in this Final Report. TIMED Science Objectives: (1) To determine the temperature, density, and wind structure of the MLTI (mixed layer thermal inertia), including the seasonal and latitudinal variations; and (2) To determine the relative importance of the various radiative, chemical, electrodynamical, and dynamical sources and sinks of energy for the thermal structure of the MLTI. GUVI Science Goals: (1) Determine the spatial and temporal variations of temperature and constituent densities in the lower thermosphere; and (2) Determine the importance of auroral energy sources and solar EUV (extreme ultraviolet) to the energy balance of the region.

Absolute measurement of undulator radiation in the extreme ultraviolet

NASA Astrophysics Data System (ADS)

Maezawa, H.; Mitani, S.; Suzuki, Y.; Kanamori, H.; Tamamushi, S.; Mikuni, A.; Kitamura, H.; Sasaki, T.

1983-04-01

The spectral brightness of undulator radiation emitted by the model PMU-1 incorporated in the SOR-RING, the dedicated synchrotron radiation source in Tokyo, has been studied in the extreme ultraviolet region from 21.6 to 72.9 eV as a function of the electron energy γ, the field parameter K, and the angle of observation ϴ in the absolute scale. A series of measurements covering the first and the second harmonic component of undulator radiation was compared with the fundamental formula λ n= {λ 0}/{2nγ 2}( {1+K 2}/{2}+γϴ 2 and the effects of finite emittance were studied. The brightness at the first peak was smaller than the theoretical value, while an enhanced second harmonic component was observed.

Efficient extreme ultraviolet plasma source generated by a CO2 laser and a liquid xenon microjet target

NASA Astrophysics Data System (ADS)

Ueno, Yoshifumi; Ariga, Tatsuya; Soumagne, George; Higashiguchi, Takeshi; Kubodera, Shoichi; Pogorelsky, Igor; Pavlishin, Igor; Stolyarov, Daniil; Babzien, Marcus; Kusche, Karl; Yakimenko, Vitaly

2007-05-01

We demonstrated efficacy of a CO2-laser-produced xenon plasma in the extreme ultraviolet (EUV) spectral region at 13.5nm at variable laser pulse widths between 200ps and 25ns. The plasma target was a 30μm liquid xenon microjet. To ensure the optimum coupling of CO2 laser energy with the plasma, they applied a prepulse yttrium aluminum garnet laser. The authors measured the conversion efficiency (CE) of the 13.5nm EUV emission for different pulse widths of the CO2 laser. A maximum CE of 0.6% was obtained for a CO2 laser pulse width of 25ns at an intensity of 5×1010W/cm2.

Quasi-supercontinuum source in the extreme ultraviolet using multiple frequency combs from high-harmonic generation

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wünsche, Martin; Fuchs, Silvio; Aull, Stefan

A quasi-supercontinuum source in the extreme ultraviolet (XUV) is demonstrated using a table-top femtosecond laser and a tunable optical parametric amplifier (OPA) as a driver for high-harmonic generation (HHG). The harmonic radiation, which is usually a comb of odd multiples of the fundamental frequency, is generated by near-infrared (NIR) laser pulses from the OPA. A quasi-continuous XUV spectrum in the range of 30 to 100 eV is realized by averaging over multiple harmonic comb spectra with slightly different fundamental frequencies and thus different spectral spacing between the individual harmonics. The driving laser wavelength is swept automatically during an averaging timemore » period. With a total photon flux of 4×10 9 photons/s in the range of 30 eV to 100 eV and 1×10 7 photons/s in the range of 100 eV to 200 eV, the resulting quasi-supercontinuum XUV source is suited for applications such as XUV coherence tomography (XCT) or near-edge absorption fine structure spectroscopy (NEXAFS).« less

Quasi-supercontinuum source in the extreme ultraviolet using multiple frequency combs from high-harmonic generation

DOE PAGES

Wünsche, Martin; Fuchs, Silvio; Aull, Stefan; ...

2017-03-16

A quasi-supercontinuum source in the extreme ultraviolet (XUV) is demonstrated using a table-top femtosecond laser and a tunable optical parametric amplifier (OPA) as a driver for high-harmonic generation (HHG). The harmonic radiation, which is usually a comb of odd multiples of the fundamental frequency, is generated by near-infrared (NIR) laser pulses from the OPA. A quasi-continuous XUV spectrum in the range of 30 to 100 eV is realized by averaging over multiple harmonic comb spectra with slightly different fundamental frequencies and thus different spectral spacing between the individual harmonics. The driving laser wavelength is swept automatically during an averaging timemore » period. With a total photon flux of 4×10 9 photons/s in the range of 30 eV to 100 eV and 1×10 7 photons/s in the range of 100 eV to 200 eV, the resulting quasi-supercontinuum XUV source is suited for applications such as XUV coherence tomography (XCT) or near-edge absorption fine structure spectroscopy (NEXAFS).« less

Coherent diffractive imaging of single helium nanodroplets with a high harmonic generation source.

PubMed

Rupp, Daniela; Monserud, Nils; Langbehn, Bruno; Sauppe, Mario; Zimmermann, Julian; Ovcharenko, Yevheniy; Möller, Thomas; Frassetto, Fabio; Poletto, Luca; Trabattoni, Andrea; Calegari, Francesca; Nisoli, Mauro; Sander, Katharina; Peltz, Christian; J Vrakking, Marc; Fennel, Thomas; Rouzée, Arnaud

2017-09-08

Coherent diffractive imaging of individual free nanoparticles has opened routes for the in situ analysis of their transient structural, optical, and electronic properties. So far, single-shot single-particle diffraction was assumed to be feasible only at extreme ultraviolet and X-ray free-electron lasers, restricting this research field to large-scale facilities. Here we demonstrate single-shot imaging of isolated helium nanodroplets using extreme ultraviolet pulses from a femtosecond-laser-driven high harmonic source. We obtain bright wide-angle scattering patterns, that allow us to uniquely identify hitherto unresolved prolate shapes of superfluid helium droplets. Our results mark the advent of single-shot gas-phase nanoscopy with lab-based short-wavelength pulses and pave the way to ultrafast coherent diffractive imaging with phase-controlled multicolor fields and attosecond pulses.Diffraction imaging studies of free individual nanoparticles have so far been restricted to XUV and X-ray free - electron laser facilities. Here the authors demonstrate the possibility of using table-top XUV laser sources to image prolate shapes of superfluid helium droplets.

Lifetime estimation of extreme-ultraviolet pellicle at 500 W source power by thermal stress analysis

NASA Astrophysics Data System (ADS)

Park, Eun-Sang; Ban, Chung-Hyun; Park, Jae-Hun; Oh, Hye-Keun

2017-10-01

The analysis of the thermal stress and the extreme-ultraviolet (EUV) pellicle is important since the pellicle could be easily damaged since the thickness of the pellicle is 50 nm thin due to 90% required EUV transmission. One of the solution is using a high emissivity metallic material on the both sides of the pellicle and it can lower the thermal stress. However, using a metallic coating on pellicle core which is usually consist of silicon group can decrease the EUV transmission compared to using a single core layer pellicle only. Therefore, we optimized thermal and optical properties of the pellicle and elect three types of the pellicle. In this paper we simulated our optimized pellicles with 500W source power. The result shows that the difference of the thermal stress is small for each case. Therefore, our result also shows that using a high emissivity coating is necessary since the cooling of the pellicle strongly depends on emissivity and it can lower the stress effectively even at high EUV source power.

Wavefront measurement of single-mode quantum cascade laser beam for seed application in laser-produced plasma extreme ultraviolet system.

PubMed

Nowak, Krzysztof M; Ohta, Takeshi; Suganuma, Takashi; Yokotsuka, Toshio; Fujimoto, Junichi; Mizoguchi, Hakaru

2012-12-01

Quantum cascade laser (QCL) is a very attractive seed source for a multikilowatt pulsed CO2 lasers applied for driving extreme ultraviolet emitting plasmas. In this Letter, we investigate output beam properties of a QCL designed to address P18 and P20 lines of 10.6 micron band of CO2 molecule. In particular, output beam quality and stability are investigated for the first time. A well-defined linear polarization and a single-mode operation enabled a use of phase retrieval method for full description of QCL output beam. A direct, multi-image numerical phase retrieval technique was developed and successfully applied to the measured intensity patterns of a QCL beam. Very good agreement between the measured and reconstructed beam profiles was observed at distances ranging from QCL aperture to infinity, proving a good understanding of the beam propagation. The results also confirm a high spatial coherence and high stability of the beam parameters, the features expected from an excellent seed source.

Extreme ultraviolet spectroscopy diagnostics of low-temperature plasmas based on a sliced multilayer grating and glass capillary optics.

PubMed

Kantsyrev, V L; Safronova, A S; Williamson, K M; Wilcox, P; Ouart, N D; Yilmaz, M F; Struve, K W; Voronov, D L; Feshchenko, R M; Artyukov, I A; Vinogradov, A V

2008-10-01

New extreme ultraviolet (EUV) spectroscopic diagnostics of relatively low-temperature plasmas based on the application of an EUV spectrometer and fast EUV diodes combined with glass capillary optics is described. An advanced high resolution dispersive element sliced multilayer grating was used in the compact EUV spectrometer. For monitoring of the time history of radiation, filtered fast EUV diodes were used in the same spectral region (>13 nm) as the EUV spectrometer. The radiation from the plasma was captured by using a single inexpensive glass capillary that was transported onto the spectrometer entrance slit and EUV diode. The use of glass capillary optics allowed placement of the spectrometer and diodes behind the thick radiation shield outside the direction of a possible hard x-ray radiation beam and debris from the plasma source. The results of the testing and application of this diagnostic for a compact laser plasma source are presented. Examples of modeling with parameters of plasmas are discussed.

Characterization of gas targets for laser produced extreme ultraviolet plasmas with a Hartmann-Shack sensor

DOE Office of Scientific and Technical Information (OSTI.GOV)

Peth, Christian; Kranzusch, Sebastian; Mann, Klaus

2004-10-01

A table top extreme ultraviolet (EUV)-source was developed at Laser-Laboratorium Goettingen for the characterization of optical components and sensoric devices in the wavelength region from 11 to 13 nm. EUV radiation is generated by focusing the beam of a Q-switched Nd:YAG laser into a pulsed xenon gas jet. Since a directed gas jet with a high number density is needed for an optimal performance of the source, conical nozzles with different cone angles were drilled with an excimer laser to produce a supersonic gas jet. The influence of the nozzle geometry on the gas jet was characterized with a Hartmann-Shackmore » wave front sensor. The deformation of a planar wave front after passing the gas jet was analyzed with this sensor, allowing a reconstruction of the gas density distribution. Thus, the gas jet was optimized resulting in an increase of EUV emission by a factor of two and a decrease of the plasma size at the same time.« less

Low temperature plasmas induced in SF6 by extreme ultraviolet (EUV) pulses

NASA Astrophysics Data System (ADS)

Bartnik, A.; Skrzeczanowski, W.; Czwartos, J.; Kostecki, J.; Fiedorowicz, H.; Wachulak, P.; Fok, T.

2018-06-01

In this work, a comparative study of extreme ultraviolet (EUV) induced low temperature SF6-based plasmas, created using two different irradiation systems, was performed. Both systems utilized laser-produced plasma (LPP) EUV sources. The essential difference between the systems concerned the formation of the driving EUV beam. The first one contained an efficient ellipsoidal EUV collector allowing for focusing of the EUV radiation at a large distance from the LPP source. The spectrum of focused radiation was limited to the long-wavelength part of the total LPP emission, λ > 8 nm, due to the reflective properties of the collector. The second system did not contain any EUV collector. The gas to be ionized was injected in the vicinity of the LPP, at a distance of the order of 10 mm. In both systems, energies of the driving photons were high enough for dissociative ionization of the SF6 molecules and ionization of atoms or even singly charged ions. Plasmas, created due to these processes, were investigated by spectral measurements in the EUV, ultraviolet (UV), and visible (VIS) spectral ranges. These low temperature plasmas were employed for preliminary experiments concerning surface treatment. The formation of pronounced nanostructures on the silicon surface after plasma treatment was demonstrated.

Absolute, Extreme-Ultraviolet Solar Spectral Irradiance Monitor (AESSIM)

DTIC Science & Technology

1994-04-01

molecular constituents [Meier 1991]. This radiation is the principal source of energy for producing and maintaining the complex, time-dependent, thermal...158.4 nm emisions for interstellar wind studies. After -2005, there is unlikely to be sufficient power to provide the requisite heating of the scan

Acid generation mechanism in anion-bound chemically amplified resists used for extreme ultraviolet lithography

NASA Astrophysics Data System (ADS)

Komuro, Yoshitaka; Yamamoto, Hiroki; Kobayashi, Kazuo; Utsumi, Yoshiyuki; Ohomori, Katsumi; Kozawa, Takahiro

2014-11-01

Extreme ultraviolet (EUV) lithography is the most promising candidate for the high-volume production of semiconductor devices with half-pitches of sub-10 nm. An anion-bound polymer (ABP), in which the anion part of onium salts is polymerized, has attracted much attention from the viewpoint of the control of acid diffusion. In this study, the acid generation mechanism in ABP films was investigated using electron (pulse), γ, and EUV radiolyses. On the basis of experimental results, the acid generation mechanism in anion-bound chemically amplified resists was proposed. The major path for proton generation in the absence of effective proton sources is considered to be the reaction of phenyl radicals with diphenylsulfide radical cations that are produced through hole transfer to the decomposition products of onium salts.

Angular distribution of ions and extreme ultraviolet emission in laser-produced tin droplet plasma

DOE Office of Scientific and Technical Information (OSTI.GOV)

Chen, Hong; Duan, Lian; Lan, Hui

Angular-resolved ion time-of-flight spectra as well as extreme ultraviolet radiation in laser-produced tin droplet plasma are investigated experimentally and theoretically. Tin droplets with a diameter of 150 μm are irradiated by a pulsed Nd:YAG laser. The ion time-of-flight spectra measured from the plasma formed by laser irradiation of the tin droplets are interpreted in terms of a theoretical elliptical Druyvesteyn distribution to deduce ion density distributions including kinetic temperatures of the plasma. The opacity of the plasma for extreme ultraviolet radiation is calculated based on the deduced ion densities and temperatures, and the angular distribution of extreme ultraviolet radiation is expressedmore » as a function of the opacity using the Beer–Lambert law. Our results show that the calculated angular distribution of extreme ultraviolet radiation is in satisfactory agreement with the experimental data.« less

Angular distribution of ions and extreme ultraviolet emission in laser-produced tin droplet plasma

NASA Astrophysics Data System (ADS)

Chen, Hong; Wang, Xinbing; Duan, Lian; Lan, Hui; Chen, Ziqi; Zuo, Duluo; Lu, Peixiang

2015-05-01

Angular-resolved ion time-of-flight spectra as well as extreme ultraviolet radiation in laser-produced tin droplet plasma are investigated experimentally and theoretically. Tin droplets with a diameter of 150 μm are irradiated by a pulsed Nd:YAG laser. The ion time-of-flight spectra measured from the plasma formed by laser irradiation of the tin droplets are interpreted in terms of a theoretical elliptical Druyvesteyn distribution to deduce ion density distributions including kinetic temperatures of the plasma. The opacity of the plasma for extreme ultraviolet radiation is calculated based on the deduced ion densities and temperatures, and the angular distribution of extreme ultraviolet radiation is expressed as a function of the opacity using the Beer-Lambert law. Our results show that the calculated angular distribution of extreme ultraviolet radiation is in satisfactory agreement with the experimental data.

Coherent diffractive imaging methods for semiconductor manufacturing

NASA Astrophysics Data System (ADS)

Helfenstein, Patrick; Mochi, Iacopo; Rajeev, Rajendran; Fernandez, Sara; Ekinci, Yasin

2017-12-01

The paradigm shift of the semiconductor industry moving from deep ultraviolet to extreme ultraviolet lithography (EUVL) brought about new challenges in the fabrication of illumination and projection optics, which constitute one of the core sources of cost of ownership for many of the metrology tools needed in the lithography process. For this reason, lensless imaging techniques based on coherent diffractive imaging started to raise interest in the EUVL community. This paper presents an overview of currently on-going research endeavors that use a number of methods based on lensless imaging with coherent light.

Preliminary designs for X-ray source modifications for the Marshall Space Flight Center's X-ray calibration facility

NASA Technical Reports Server (NTRS)

Croft, W. L.

1986-01-01

The objective of this investigation is to develop preliminary designs for modifications to the X-ray source of the MSFC X-Ray Calibration Facility. Recommendations are made regarding: (1) the production of an unpolarized X-ray beam, (2) modification of the source to provide characteristic X-rays with energies up to 40 keV, and (3) addition of the capability to calibrate instruments in the extreme ultraviolet wavelength region.

A comparison between measured surface microtopography and observed scattering in the extreme ultraviolet

NASA Technical Reports Server (NTRS)

Green, James; Jelinsky, Sharon; Bowyer, Stuart; Malina, Roger F.

1988-01-01

The paper presents comparative measurements of surface roughness on prepared samples. These measurements have been made with both Talystep profilometers and WYKO interferometers. In addition, the scattering distribution from these samples was measured at extreme ultraviolet wavelengths. The utility of the WYKO interferometer and Talystep device for specifying extreme ultraviolet mirror surface quality is discussed.

Prototype through-pellicle coherent imaging using a 30nm tabletop EUV source

NASA Astrophysics Data System (ADS)

Bevis, Charles S.; Karl, Robert M.; Wang, Bin; Esashi, Yuka; Tanksalvala, Michael; Porter, Christina L.; Johnsen, Peter; Adams, Daniel E.; Murnane, Margaret M.; Kapteyn, Henry C.

2018-03-01

We present preliminary through-pellicle imaging using a 30nm tabletop extreme ultraviolet (EUV) coherent diffractive imaging microscope. We show that even in a non-optimized setup, this technique enables through-pellicle imaging of a sample with no detectable impact on image fidelity or resolution.

Challenges of anamorphic high-NA lithography and mask making

NASA Astrophysics Data System (ADS)

Hsu, Stephen D.; Liu, Jingjing

2017-06-01

Chip makers are actively working on the adoption of 0.33 numerical aperture (NA) EUV scanners for the 7-nm and 5-nm nodes (B. Turko, S. L. Carson, A. Lio, T. Liang, M. Phillips, et al., in `Proc. SPIE9776, Extreme Ultraviolet (EUV) Lithography VII', vol. 977602 (2016) doi: 10.1117/12.2225014; A. Lio, in `Proc. SPIE9776, Extreme Ultraviolet (EUV) Lithography VII', vol. 97760V (2016) doi: 10.1117/12.2225017). In the meantime, leading foundries and integrated device manufacturers are starting to investigate patterning options beyond the 5-nm node (O. Wood, S. Raghunathan, P. Mangat, V. Philipsen, V. Luong, et al., in `Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI', vol. 94220I (2015) doi: 10.1117/12.2085022). To minimize the cost and process complexity of multiple patterning beyond the 5-nm node, EUV high-NA single-exposure patterning is a preferred method over EUV double patterning (O. Wood, S. Raghunathan, P. Mangat, V. Philipsen, V. Luong, et al., in `Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI', vol. 94220I (2015) doi: 10.1117/12.2085022; J. van Schoot, K. van Ingen Schenau, G. Bottiglieri, K. Troost, J. Zimmerman, et al., `Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII', vol. 97761I (2016) doi: 10.1117/12.2220150). The EUV high-NA scanner equipped with a projection lens of 0.55 NA is designed to support resolutions below 10 nm. The high-NA system is beneficial for enhancing resolution, minimizing mask proximity correction bias, improving normalized image log slope (NILS), and controlling CD uniformity (CDU). However, increasing NA from 0.33 to 0.55 reduces the depth of focus (DOF) significantly. Therefore, the source mask optimization (SMO) with sub-resolution assist features (SRAFs) are needed to increase DOF to meet the demanding full chip process control requirements (S. Hsu, R. Howell, J. Jia, H.-Y. Liu, K. Gronlund, et al., EUV `Proc. SPIE9048, Extreme Ultraviolet (EUV) Lithography VI', (2015) doi: 10.1117/12.2086074). To ensure no assist feature printing, the assist feature sizes need to be scaled with λ/NA. The extremely small SRAF width (below 25 nm on the reticle) is difficult to fabricate across the full reticle. In this paper, we introduce an innovative `attenuated SRAF' to improve SRAF manufacturability and still maintain the process window benefit. A new mask fabrication process is proposed to use existing mask-making capability to manufacture the attenuated SRAFs. The high-NA EUV system utilizes anamorphic reduction; 4× in the horizontal (slit) direction and 8× in the vertical (scanning) direction (J. van Schoot, K. van Ingen Schenau, G. Bottiglieri, K. Troost, J. Zimmerman, et al., `Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII', vol. 97761I (2016) doi: 10.1117/12.2220150; B. Kneer, S. Migura, W. Kaiser, J. T. Neumann, J. van Schoot, in `Proc. SPIE9422, Extreme Ultraviolet (EUV) Lithography VI', vol. 94221G (2015) doi: 10.1117/12.2175488). For an anamorphic system, the magnification has an angular dependency, and thus, familiar mask specifications such as mask error factor (MEF) need to be redefined. Similarly, mask-manufacturing rule check (MRC) needs to consider feature orientation.

Extreme ultraviolet lithography machine

DOEpatents

Tichenor, Daniel A.; Kubiak, Glenn D.; Haney, Steven J.; Sweeney, Donald W.

2000-01-01

An extreme ultraviolet lithography (EUVL) machine or system for producing integrated circuit (IC) components, such as transistors, formed on a substrate. The EUVL machine utilizes a laser plasma point source directed via an optical arrangement onto a mask or reticle which is reflected by a multiple mirror system onto the substrate or target. The EUVL machine operates in the 10-14 nm wavelength soft x-ray photon. Basically the EUV machine includes an evacuated source chamber, an evacuated main or project chamber interconnected by a transport tube arrangement, wherein a laser beam is directed into a plasma generator which produces an illumination beam which is directed by optics from the source chamber through the connecting tube, into the projection chamber, and onto the reticle or mask, from which a patterned beam is reflected by optics in a projection optics (PO) box mounted in the main or projection chamber onto the substrate. In one embodiment of a EUVL machine, nine optical components are utilized, with four of the optical components located in the PO box. The main or projection chamber includes vibration isolators for the PO box and a vibration isolator mounting for the substrate, with the main or projection chamber being mounted on a support structure and being isolated.

Real-time and sub-wavelength ultrafast coherent diffraction imaging in the extreme ultraviolet.

PubMed

Zürch, M; Rothhardt, J; Hädrich, S; Demmler, S; Krebs, M; Limpert, J; Tünnermann, A; Guggenmos, A; Kleineberg, U; Spielmann, C

2014-12-08

Coherent Diffraction Imaging is a technique to study matter with nanometer-scale spatial resolution based on coherent illumination of the sample with hard X-ray, soft X-ray or extreme ultraviolet light delivered from synchrotrons or more recently X-ray Free-Electron Lasers. This robust technique simultaneously allows quantitative amplitude and phase contrast imaging. Laser-driven high harmonic generation XUV-sources allow table-top realizations. However, the low conversion efficiency of lab-based sources imposes either a large scale laser system or long exposure times, preventing many applications. Here we present a lensless imaging experiment combining a high numerical aperture (NA = 0.8) setup with a high average power fibre laser driven high harmonic source. The high flux and narrow-band harmonic line at 33.2 nm enables either sub-wavelength spatial resolution close to the Abbe limit (Δr = 0.8λ) for long exposure time, or sub-70 nm imaging in less than one second. The unprecedented high spatial resolution, compactness of the setup together with the real-time capability paves the way for a plethora of applications in fundamental and life sciences.

Estimation of optimum density and temperature for maximum efficiency of tin ions in Z discharge extreme ultraviolet sources

DOE Office of Scientific and Technical Information (OSTI.GOV)

Masnavi, Majid; Nakajima, Mitsuo; Hotta, Eiki

Extreme ultraviolet (EUV) discharge-based lamps for EUV lithography need to generate extremely high power in the narrow spectrum band of 13.5{+-}0.135 nm. A simplified collisional-radiative model and radiative transfer solution for an isotropic medium were utilized to investigate the wavelength-integrated light outputs in tin (Sn) plasma. Detailed calculations using the Hebrew University-Lawrence Livermore atomic code were employed for determination of necessary atomic data of the Sn{sup 4+} to Sn{sup 13+} charge states. The result of model is compared with experimental spectra from a Sn-based discharge-produced plasma. The analysis reveals that considerably larger efficiency compared to the so-called efficiency of amore » black-body radiator is formed for the electron density {approx_equal}10{sup 18} cm{sup -3}. For higher electron density, the spectral efficiency of Sn plasma reduces due to the saturation of resonance transitions.« less

Discharge source with gas curtain for protecting optics from particles

DOEpatents

Fornaciari, Neal R.; Kanouff, Michael P.

2004-03-30

A gas curtain device is employed to deflect debris that is generated by an extreme ultraviolet and soft x-ray radiation discharge source such as an electric discharge plasma source. The gas curtain device projects a stream of gas over the path of the radiation to deflect debris particles into a direction that is different from that of the path of the radiation. The gas curtain can be employed to prevent debris accumulation on the optics used in photolithography.

Extreme-UV electrical discharge source

DOEpatents

Fornaciari, Neal R.; Nygren, Richard E.; Ulrickson, Michael A.

2002-01-01

An extreme ultraviolet and soft x-ray radiation electric capillary discharge source that includes a boron nitride housing defining a capillary bore that is positioned between two electrodes one of which is connected to a source of electric potential can generate a high EUV and soft x-ray radiation flux from the capillary bore outlet with minimal debris. The electrode that is positioned adjacent the capillary bore outlet is typically grounded. Pyrolytic boron nitride, highly oriented pyrolytic boron nitride, and cubic boron nitride are particularly suited. The boron nitride capillary bore can be configured as an insert that is encased in an exterior housing that is constructed of a thermally conductive material. Positioning the ground electrode sufficiently close to the capillary bore outlet also reduces bore erosion.

Illumination system design for a three-aspherical-mirror projection camera for extreme-ultraviolet lithography.

PubMed

Li, Y; Kinoshita, H; Watanabe, T; Irie, S; Shirayone, S; Okazaki, S

2000-07-01

A scanning critical illumination system is designed to couple a synchrotron radiation source to a three-aspherical-mirror imaging system for extreme ultraviolet lithography. A static illumination area of H x V = 8 mm x 3 mm (where H is horizontal and V is vertical) can be obtained. Uniform intensity distribution and a large ring field of H x V = 150 mm x 3 mm can be achieved by scanning of the mirror of the condenser. The coherence factor (sigma) of this illumination system is approximately 0.6, with the same beam divergence in both the horizontal and the vertical directions. We describe the performance of the imaging optics at sigma = 0.6 to confirm that the illumination optics can meet the requirements for three-aspherical-mirror imaging optics with a feature size of 0.06 microm.

Cancer cell classification with coherent diffraction imaging using an extreme ultraviolet radiation source

PubMed Central

Zürch, Michael; Foertsch, Stefan; Matzas, Mark; Pachmann, Katharina; Kuth, Rainer; Spielmann, Christian

2014-01-01

Abstract. In cancer treatment, it is highly desirable to classify single cancer cells in real time. The standard method is polymerase chain reaction requiring a substantial amount of resources and time. Here, we present an innovative approach for rapidly classifying different cell types: we measure the diffraction pattern of a single cell illuminated with coherent extreme ultraviolet (XUV) laser-generated radiation. These patterns allow distinguishing different breast cancer cell types in a subsequent step. Moreover, the morphology of the object can be retrieved from the diffraction pattern with submicron resolution. In a proof-of-principle experiment, we prepared single MCF7 and SKBR3 breast cancer cells on gold-coated silica slides. The output of a laser-driven XUV light source is focused onto a single unstained and unlabeled cancer cell. With the resulting diffraction pattern, we could clearly identify the different cell types. With an improved setup, it will not only be feasible to classify circulating tumor cells with a high throughput, but also to identify smaller objects such as bacteria or even viruses. PMID:26158049

Cancer cell classification with coherent diffraction imaging using an extreme ultraviolet radiation source.

PubMed

Zürch, Michael; Foertsch, Stefan; Matzas, Mark; Pachmann, Katharina; Kuth, Rainer; Spielmann, Christian

2014-10-01

In cancer treatment, it is highly desirable to classify single cancer cells in real time. The standard method is polymerase chain reaction requiring a substantial amount of resources and time. Here, we present an innovative approach for rapidly classifying different cell types: we measure the diffraction pattern of a single cell illuminated with coherent extreme ultraviolet (XUV) laser-generated radiation. These patterns allow distinguishing different breast cancer cell types in a subsequent step. Moreover, the morphology of the object can be retrieved from the diffraction pattern with submicron resolution. In a proof-of-principle experiment, we prepared single MCF7 and SKBR3 breast cancer cells on gold-coated silica slides. The output of a laser-driven XUV light source is focused onto a single unstained and unlabeled cancer cell. With the resulting diffraction pattern, we could clearly identify the different cell types. With an improved setup, it will not only be feasible to classify circulating tumor cells with a high throughput, but also to identify smaller objects such as bacteria or even viruses.

Extreme Ultraviolet Variability Experiment (EVE) Multiple EUV Grating Spectrographs (MEGS): Radiometric Calibrations and Results

NASA Technical Reports Server (NTRS)

Hock, R. A.; Woods, T. N.; Crotser, D.; Eparvier, F. G.; Woodraska, D. L.; Chamberlin, P. C.; Woods, E. C.

2010-01-01

The NASA Solar Dynamics Observatory (SDO), scheduled for launch in early 2010, incorporates a suite of instruments including the Extreme Ultraviolet Variability Experiment (EVE). EVE has multiple instruments including the Multiple Extreme ultraviolet Grating Spectrographs (MEGS) A, B, and P instruments, the Solar Aspect Monitor (SAM), and the Extreme ultraviolet SpectroPhotometer (ESP). The radiometric calibration of EVE, necessary to convert the instrument counts to physical units, was performed at the National Institute of Standards and Technology (NIST) Synchrotron Ultraviolet Radiation Facility (SURF III) located in Gaithersburg, Maryland. This paper presents the results and derived accuracy of this radiometric calibration for the MEGS A, B, P, and SAM instruments, while the calibration of the ESP instrument is addressed by Didkovsky et al. . In addition, solar measurements that were taken on 14 April 2008, during the NASA 36.240 sounding-rocket flight, are shown for the prototype EVE instruments.

Research in extreme ultraviolet and far ultraviolet astronomy

NASA Technical Reports Server (NTRS)

Labov, S. E.

1985-01-01

Instruments designed to explore different aspects of far and extreme ultraviolet cosmic radiation were studied. The far ultraviolet imager (FUVI) was flown on the Aries sounding rocket. Its unique large format 75mm detector mapped out the far ultraviolet background radiation with a resolution of only a few arc minutes. Analysis of this data indicates to what extent the FUVI background is extra galactic in origin. A power spectrum of the spatial fluctuations will have direct consequences for galactic evolution.

From the Sun with Love

NASA Image and Video Library

2017-12-08

This Solar Dynamics Observatory image of the Sun taken on February 1, 2013 in extreme ultraviolet light captures a heart-shaped dark coronal hole. Coronal holes are areas of the Sun's surface that are the source of open magnetic field lines that head way out into space. They are also the source regions of the fast solar wind, which is characterized by a relatively steady speed of approximately 800 km/s (about 1.8 million mph).

Time resolved 3D momentum imaging of ultrafast dynamics by coherent VUV-XUV radiation

DOE PAGES

Sturm, F. P.; Wright, T. W.; Ray, D.; ...

2016-06-14

Have we present a new experimental setup for measuring ultrafast nuclear and electron dynamics of molecules after photo-excitation and ionization. We combine a high flux femtosecond vacuum ultraviolet (VUV) and extreme ultraviolet (XUV) source with an internally cold molecular beam and a 3D momentum imaging particle spectrometer to measure electrons and ions in coincidence. We describe a variety of tools developed to perform pump-probe studies in the VUV-XUV spectrum and to modify and characterize the photon beam. First benchmark experiments are presented to demonstrate the capabilities of the system.

Exploring EUV Spicules Using 304 Angstrom He II Data from SDO AIA

NASA Technical Reports Server (NTRS)

Snyder, Ian R.; Sterling, Alphonse C.; Falconer, David A.; Moore, Ron L.

2014-01-01

We present results from a statistical study of He II 304 Angstrom Extreme Ultraviolet (EUV) spicules at the limb of the Sun. We also measured properties of one macrospicule; macrospicules are longer than most spicules, and much broader in width than spicules. We use high-cadence (12 second) and high-resolution (0.6 arcseconds pixels) resolution data from the Atmospheric Imaging Array (AIA) instrument on the Solar Dynamic Observatory (SDO). All of the observed events occurred near the solar north pole, where quiet Sun or coronal hole environments ensued. We examined the maximum lengths, maximum rise velocities, and lifetimes of 33 Extreme Ultraviolet (EUV) spicules and the macrospicule. For the bulk of the Extreme Ultraviolet (EUV) spicules these quantities are, respectively, approximately 10,000-40,000 kilometers, 20-100 kilometers per second, and approximately 100- approximately 1000 seconds. For the macrospicule the corresponding quantities were respectively approximately 60,000 kilometers, approximately 130 kilometers per second, approximately 1800 seconds, which is typical of macrospicules measured by other workers. Therefore macrospicules are taller, longer-lived, and faster than most Extreme Ultraviolet (EUV) spicules. The rise profiles of both the spicules and the macrospicules match well a second-order ("parabolic" ) trajectory, although the acceleration was often weaker than that of solar gravity in the profiles fitted to the trajectories. Our macrospicule also had an obvious brightening at its base at birth, while such brightening was not apparent for the Extreme Ultraviolet (EUV) spicules. Most of the Extreme Ultraviolet (EUV) spicules remained visible during their descent back to the solar surface, although a small percentage of the spicules and the macrospicule faded out before falling back to the surface. Our sample of macrospicules is not yet large enough to determine whether their initiation mechanism is identical to that of Extreme Ultraviolet (EUV) spicules.

LASER APPLICATIONS AND OTHER TOPICS IN QUANTUM ELECTRONICS: Laser-induced extreme UV radiation sources for manufacturing next-generation integrated circuits

NASA Astrophysics Data System (ADS)

Borisov, V. M.; Vinokhodov, A. Yu; Ivanov, A. S.; Kiryukhin, Yu B.; Mishchenko, V. A.; Prokof'ev, A. V.; Khristoforov, O. B.

2009-10-01

The development of high-power discharge sources emitting in the 13.5±0.135-nm spectral band is of current interest because they are promising for applications in industrial EUV (extreme ultraviolet) lithography for manufacturing integrated circuits according to technological precision standards of 22 nm and smaller. The parameters of EUV sources based on a laser-induced discharge in tin vapours between rotating disc electrodes are investigated. The properties of the discharge initiation by laser radiation at different wavelengths are established and the laser pulse parameters providing the maximum energy characteristics of the EUV source are determined. The EUV source developed in the study emits an average power of 276 W in the 13.5±0.135-nm spectral band on conversion to the solid angle 2π sr in the stationary regime at a pulse repetition rate of 3000 Hz.

Cluster beam targets for laser plasma extreme ultraviolet and soft x-ray sources

DOEpatents

Kublak, Glenn D.; Richardson, Martin C. (CREOL

1996-01-01

Method and apparatus for producing extreme ultra violet (EUV) and soft x-ray radiation from an ultra-low debris plasma source are disclosed. Targets are produced by the free jet expansion of various gases through a temperature controlled nozzle to form molecular clusters. These target clusters are subsequently irradiated with commercially available lasers of moderate intensity (10.sup.11 -10.sup.12 watts/cm.sup.2) to produce a plasma radiating in the region of 0.5 to 100 nanometers. By appropriate adjustment of the experimental conditions the laser focus can be moved 10-30 mm from the nozzle thereby eliminating debris produced by plasma erosion of the nozzle.

Vacuum-ultraviolet lasers and spectroscopy

NASA Astrophysics Data System (ADS)

Hollenstein, U.

2012-01-01

Single-photon ionisation of most atoms and molecules requires short-wavelength radiation, typically in the vacuum-ultraviolet (VUV, λ < 200 nm) or extreme ultraviolet (XUV, λ < 105 nm) region of the electromagnetic spectrum. The first VUV and XUV radiation sources used to study molecular photoabsorption and photoionisation spectra were light sources emitting a broad continuous spectrum, such as high pressure lamps or synchrotrons. Monochromatic VUV and XUV radiation was obtained using diffraction gratings in evacuated monochromators, which resulted in a resolving power ν/Δv of at best 106 (i. e. 0.1 cm-1 at 100 000 cm-1), but more typically in the range 104-105 . The invention of the laser and the development of nonlinear optical frequency-upconversion techniques enabled the development of table-top narrow-bandwidth, coherent VUV and XUV laser sources with which VUV photoabsorption, photoionisation and photoelectron spectra of molecules can be recorded at much higher resolution, the best sources having bandwidths better than 50 MHz. Such laser sources are ideally suited to study the structure and dynamics of electronically excited states of atoms and molecules and molecular photoionisation using photoabsorption, photoionisation and photoelectron spectroscopy. This chapter presents the general principles that are exploited to generate tunable narrow-band laser radiation below 200 nm and describes spectroscopic methods such as photoabsorption spectroscopy, photoionisation spectroscopy and threshold photoelectron spectroscopy that relay on the broad tunability and narrow-bandwidth of VUV radiation sources.

Research in extreme ultraviolet and far ultraviolet astronomy

NASA Technical Reports Server (NTRS)

Bowyer, C. S.

1985-01-01

The Far Ultraviolet imager (FUVI) was flown on the Aries class sounding rocket 24.015, producing outstanding results. The diffuse extreme ultraviolet (EUV) background spectrometer which is under construction is described. It will be launched on the Black Brant sounding rocket flight number 27.086. Ongoing design studies of a high resolution spectrometer are discussed. This instrument incorporates a one meter normal incidence mirror and will be suitable for an advanced Spartan mission.

Gradient descent algorithm applied to wavefront retrieval from through-focus images by an extreme ultraviolet microscope with partially coherent source

DOE PAGES

Yamazoe, Kenji; Mochi, Iacopo; Goldberg, Kenneth A.

2014-12-01

The wavefront retrieval by gradient descent algorithm that is typically applied to coherent or incoherent imaging is extended to retrieve a wavefront from a series of through-focus images by partially coherent illumination. For accurate retrieval, we modeled partial coherence as well as object transmittance into the gradient descent algorithm. However, this modeling increases the computation time due to the complexity of partially coherent imaging simulation that is repeatedly used in the optimization loop. To accelerate the computation, we incorporate not only the Fourier transform but also an eigenfunction decomposition of the image. As a demonstration, the extended algorithm is appliedmore » to retrieve a field-dependent wavefront of a microscope operated at extreme ultraviolet wavelength (13.4 nm). The retrieved wavefront qualitatively matches the expected characteristics of the lens design.« less

Gradient descent algorithm applied to wavefront retrieval from through-focus images by an extreme ultraviolet microscope with partially coherent source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yamazoe, Kenji; Mochi, Iacopo; Goldberg, Kenneth A.

The wavefront retrieval by gradient descent algorithm that is typically applied to coherent or incoherent imaging is extended to retrieve a wavefront from a series of through-focus images by partially coherent illumination. For accurate retrieval, we modeled partial coherence as well as object transmittance into the gradient descent algorithm. However, this modeling increases the computation time due to the complexity of partially coherent imaging simulation that is repeatedly used in the optimization loop. To accelerate the computation, we incorporate not only the Fourier transform but also an eigenfunction decomposition of the image. As a demonstration, the extended algorithm is appliedmore » to retrieve a field-dependent wavefront of a microscope operated at extreme ultraviolet wavelength (13.4 nm). The retrieved wavefront qualitatively matches the expected characteristics of the lens design.« less

Absolute sensitivity calibration of an extreme ultraviolet spectrometer for tokamak measurements

NASA Astrophysics Data System (ADS)

Guirlet, R.; Schwob, J. L.; Meyer, O.; Vartanian, S.

2017-01-01

An extreme ultraviolet spectrometer installed on the Tore Supra tokamak has been calibrated in absolute units of brightness in the range 10-340 Å. This has been performed by means of a combination of techniques. The range 10-113 Å was absolutely calibrated by using an ultrasoft-X ray source emitting six spectral lines in this range. The calibration transfer to the range 113-182 Å was performed using the spectral line intensity branching ratio method. The range 182-340 Å was calibrated thanks to radiative-collisional modelling of spectral line intensity ratios. The maximum sensitivity of the spectrometer was found to lie around 100 Å. Around this wavelength, the sensitivity is fairly flat in a 80 Å wide interval. The spatial variations of sensitivity along the detector assembly were also measured. The observed trend is related to the quantum efficiency decrease as the angle of the incoming photon trajectories becomes more grazing.

Laboratory calibration of density-dependent lines in the extreme ultraviolet spectral region

NASA Astrophysics Data System (ADS)

Lepson, J. K.; Beiersdorfer, P.; Gu, M. F.; Desai, P.; Bitter, M.; Roquemore, L.; Reinke, M. L.

2012-05-01

We have been making spectral measurements in the extreme ultraviolet (EUV) from different laboratory sources in order to investigate the electron density dependence of various astrophysically important emission lines and to test the atomic models underlying the diagnostic line ratios. The measurement are being performed at the Livermore EBIT-I electron beam ion trap, the National Spherical Torus Experiment (NSTX) at Princeton, and the Alcator C-Mod tokamak at the Massachusetts Institute of Technology, which together span an electron density of four orders of magnitude and which allow us to test the various models at high and low density limits. Here we present measurements of Fe XXII and Ar XIV, which include new data from an ultra high resolution (λ/Δλ >4000) spectrometer at the EBIT-I facility. We found good agreement between the measurements and modeling calculations for Fe XXII, but poorer agreement for Ar XIV.

Generation of Bright Phase-matched Circularly-polarized Extreme Ultraviolet High Harmonics

DTIC Science & Technology

2014-12-08

circularly-polarized laser pulses field-ionize a gas in a hollow - core waveguide. We use this new light source for magnetic circular dichroism...polarized with opposite helicity in a gas-filled hollow waveguide (see Supplementary Section 6 for details on the important features of this source...mJ/pulse) driving lasers are focused into a 150-µm-diameter, 2-cm-long gas-filled hollow waveguide using lenses with focal lengths of 50 cm and 75 cm

Interstellar absorption of the extreme ultraviolet flux from two hot white dwarfs

NASA Technical Reports Server (NTRS)

Cash, W.; Bowyer, S.; Lampton, M.

1979-01-01

Photometric upper limits on the 300 A flux from the hot white dwarfs Feige 24 and G191-B2B are presented. The limits, which were obtained with a rocket-borne extreme ultraviolet imaging telescope, are interpreted as lower limits on the density of the intervening interstellar matter. The limits are used to investigate the state of interstellar gas within 100 pc. A local clumpiness factor, which is of value in planning future extreme ultraviolet observations, is derived.

The mirrors for the Extreme Ultraviolet Explorer

NASA Technical Reports Server (NTRS)

Finley, David S.; Green, James C.; Bowyer, Stuart; Malina, Roger F.

1986-01-01

Flight mirrors for the Extreme Ultraviolet Explorer satellite are currently under fabrication. The grazing incidence metal mirrors are Wolter-Schwarzschild Type I and II and are figured by diamond turning. Imaging performance is excellent, with the figure after polishing for the best mirror being such that the full width-half maximum is 1.0 arc seconds and the half energy width is 8 arc seconds measured at visible wavelengths. Surface finish, as determined from scattering measurements in the extreme ultraviolet, is about 20 A rms.

Extreme ultraviolet reflectivity studies of gold on glass and metal substrates

NASA Technical Reports Server (NTRS)

Jelinsky, Sharon R.; Malina, Roger F.; Jelinsky, Patrick

1988-01-01

The paper reports measurements of the extreme ultraviolet reflectivity of gold from 44 to 920 A at grazing incidence. Gold was deposited using vacuum evaporation and electroplating on substrates of glass and polished nickel, respectively. Measurements are also presented of the extreme ultraviolet reflectivity of electroless nickel in the same wavelength region, where one of the polished nickel substrates was used as a sample. Derived optical constants for evaporated and electroplated gold and electroless nickel are presented. Additional studies of the effects of various contaminants on the EUV reflectivity are also reported. The variations of the optical constants are discussed in terms of density variations, surface roughness and contamination effects. These results ae reported as part of studies for the Extreme Ultraviolet Explorer satellite program to determine acceptance criteria for the EUV optics, contamination budgets and calibration plans.

Photoresist composition for extreme ultraviolet lithography

DOEpatents

Felter, T. E.; Kubiak, G. D.

1999-01-01

A method of producing a patterned array of features, in particular, gate apertures, in the size range 0.4-0.05 .mu.m using projection lithography and extreme ultraviolet (EUV) radiation. A high energy laser beam is used to vaporize a target material in order to produce a plasma which in turn, produces extreme ultraviolet radiation of a characteristic wavelength of about 13 nm for lithographic applications. The radiation is transmitted by a series of reflective mirrors to a mask which bears the pattern to be printed. The demagnified focused mask pattern is, in turn, transmitted by means of appropriate optics and in a single exposure, to a substrate coated with photoresists designed to be transparent to EUV radiation and also satisfy conventional processing methods. A photoresist composition for extreme ultraviolet radiation of boron carbide polymers, hydrochlorocarbons and mixtures thereof.

Spatial Distribution of Io's Neutral Oxygen Cloud Observed by Hisaki

NASA Astrophysics Data System (ADS)

Koga, Ryoichi; Tsuchiya, Fuminori; Kagitani, Masato; Sakanoi, Takeshi; Yoneda, Mizuki; Yoshioka, Kazuo; Yoshikawa, Ichiro; Kimura, Tomoki; Murakami, Go; Yamazaki, Atsushi; Smith, H. Todd; Bagenal, Fran

2018-05-01

We report on the spatial distribution of a neutral oxygen cloud surrounding Jupiter's moon Io and along Io's orbit observed by the Hisaki satellite. Atomic oxygen and sulfur in Io's atmosphere escape from the exosphere mainly through atmospheric sputtering. Some of the neutral atoms escape from Io's gravitational sphere and form neutral clouds around Jupiter. The extreme ultraviolet spectrograph called EXCEED (Extreme Ultraviolet Spectroscope for Exospheric Dynamics) installed on the Japan Aerospace Exploration Agency's Hisaki satellite observed the Io plasma torus continuously in 2014-2015, and we derived the spatial distribution of atomic oxygen emissions at 130.4 nm. The results show that Io's oxygen cloud is composed of two regions, namely, a dense region near Io and a diffuse region with a longitudinally homogeneous distribution along Io's orbit. The dense region mainly extends on the leading side of Io and inside of Io's orbit. The emissions spread out to 7.6 Jupiter radii (RJ). Based on Hisaki observations, we estimated the radial distribution of the atomic oxygen number density and oxygen ion source rate. The peak atomic oxygen number density is 80 cm-3, which is spread 1.2 RJ in the north-south direction. We found more oxygen atoms inside Io's orbit than a previous study. We estimated the total oxygen ion source rate to be 410 kg/s, which is consistent with the value derived from a previous study that used a physical chemistry model based on Hisaki observations of ultraviolet emission ions in the Io plasma torus.

Extreme ultraviolet spectra of multiply charged tungsten ions

NASA Astrophysics Data System (ADS)

Mita, Momoe; Sakaue, Hiroyuki A.; Kato, Daiji; Murakami, Izumi; Nakamura, Nobuyuki

2017-11-01

We present extreme ultraviolet spectra of multiply charged tungsten ions observed with an electron beam ion trap. The observed spectra are compared with previous experimental results and theoretical spectra obtained with a collisional radiative model.

Fluorescence of molecular hydrogen excited by solar extreme-ultraviolet radiation

NASA Technical Reports Server (NTRS)

Feldman, P. D.; Fastie, W. G.

1973-01-01

During trans-earth coast, the Apollo 17 ultraviolet spectrometer was scheduled to make observations of the far ultraviolet background in selected regions of the sky. In the course of one of these observations, the spacecraft fuel cells were routinely purged of excess hydrogen and water vapor. The ultraviolet fluorescence spectrum of the purged molecular hydrogen excited by solar extreme ultraviolet radiation is interpreted by absorption of solar L-beta and L-gamma radiation in the nearly resonant (6, 0) and (11, 0) Lyman bands. The results are deemed significant for ultraviolet spectroscopic investigations of the atmospheres of the moon and planets since Lyman-band fluorescence provides an unambiguous means of identification of molecular hydrogen in upper atmospheres.

Two normal incidence collimators designed for the calibration of the extreme ultraviolet explorer

NASA Technical Reports Server (NTRS)

Jelinsky, Sharon R.; Welsh, Barry; Jelinsky, Patrick; Spiller, Eberhard

1988-01-01

Two Dall-Kirkham, normal incidence collimators have been designed to calibrate the imaging properties of the Extreme Ultraviolet Explorer over the wavelength region from 114 to 2000 A. The mirrors of the short-wavelength, 25-cm diameter collimator are superpolished Zerodur which have been multilayer coated for optimal reflectivity at 114 A. The mirrors of the long-wavelength, 41.25-cm diameter collimator are gold coated Zerodur for high reflectance above 300 A. The design, performance, and future use of these collimators in the extreme ultra-violet is discussed.

The Extreme Ultraviolet Explorer mission - Overview and initial results

NASA Technical Reports Server (NTRS)

Haisch, B.; Bowyer, S.; Malina, R. F.

1993-01-01

The history of extreme ultraviolet (EUV) astronomy is briefly reviewed, and an overview of the Extreme Ultraviolet Explorer mission, launched into a near-earth (550 km) orbit on June 7, 1992, is presented. First, the principal objective of the mission are summarized. The instrumentation and operation of the mission are then described, with particular attention given to the sky survey instruments, the deep survey instrument, and the spectrometers. The discussion also covers the current view of the interstellar medium, early results from the mission, and future prospects for EUV astronomy.

EUV wavefront metrology system in EUVA

NASA Astrophysics Data System (ADS)

Hasegawa, Takayuki; Ouchi, Chidane; Hasegawa, Masanobu; Kato, Seima; Suzuki, Akiyoshi; Sugisaki, Katsumi; Murakami, Katsuhiko; Saito, Jun; Niibe, Masahito

2004-05-01

An Experimental extreme ultraviolet (EUV) interferometer (EEI) using an undulator as a light source was installed in New SUBARU synchrotron facility at Himeji Institute of Technology (HIT). The EEI can evaluate the five metrology methods reported before. (1) A purpose of the EEI is to determine the most suitable method for measuring the projection optics of EUV lithography systems for mass production tools.

Berkeley extreme-ultraviolet airglow rocket spectrometer - BEARS

NASA Technical Reports Server (NTRS)

Cotton, D. M.; Chakrabarti, S.

1992-01-01

The Berkeley EUV airglow rocket spectrometer (BEARS) instrument is described. The instrument was designed in particular to measure the dominant lines of atomic oxygen in the FUV and EUV dayglow at 1356, 1304, 1027, and 989 A, which is the ultimate source of airglow emissions. The optical and mechanical design of the instrument, the detector, electronics, calibration, flight operations, and results are examined.

Modeling of radiative properties of Sn plasmas for extreme-ultraviolet source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sasaki, Akira; Sunahara, Atsushi; Furukawa, Hiroyuki

Atomic processes in Sn plasmas are investigated for application to extreme-ultraviolet (EUV) light sources used in microlithography. We develop a full collisional radiative (CR) model of Sn plasmas based on calculated atomic data using Hebrew University Lawrence Livermore Atomic Code (HULLAC). Resonance and satellite lines from singly and multiply excited states of Sn ions, which contribute significantly to the EUV emission, are identified and included in the model through a systematic investigation of their effect on the emission spectra. The wavelengths of the 4d-4f+4p-4d transitions of Sn{sup 5+} to Sn{sup 13+} are investigated, because of their importance for determining themore » conversion efficiency of the EUV source, in conjunction with the effect of configuration interaction in the calculation of atomic structure. Calculated emission spectra are compared with those of charge exchange spectroscopy and of laser produced plasma EUV sources. The comparison is also carried out for the opacity of a radiatively heated Sn sample. A reasonable agreement is obtained between calculated and experimental EUV emission spectra observed under the typical condition of EUV sources with the ion density and ionization temperature of the plasma around 10{sup 18} cm{sup -3} and 20 eV, respectively, by applying a wavelength correction to the resonance and satellite lines. Finally, the spectral emissivity and opacity of Sn plasmas are calculated as a function of electron temperature and ion density. The results are useful for radiation hydrodynamics simulations for the optimization of EUV sources.« less

Attosecond Coherent Control of the Photo-Dissociation of Oxygen Molecules

NASA Astrophysics Data System (ADS)

Sturm, Felix; Ray, Dipanwita; Wright, Travis; Shivaram, Niranjan; Bocharova, Irina; Slaughter, Daniel; Ranitovic, Predrag; Belkacem, Ali; Weber, Thorsten

2016-05-01

Attosecond Coherent Control has emerged in recent years as a technique to manipulate the absorption and ionization in atoms as well as the dissociation of molecules on an attosecond time scale. Single attosecond pulses and attosecond pulse trains (APTs) can coherently excite multiple electronic states. The electronic and nuclear wave packets can then be coupled with a second pulse forming multiple interfering quantum pathways. We have built a high flux extreme ultraviolet (XUV) light source delivering APTs based on HHG that allows to selectively excite neutral and ion states in molecules. Our beamline provides spectral selectivity and attosecond interferometric control of the pulses. In the study presented here, we use APTs, generated by High Harmonic Generation in a high flux extreme ultraviolet light source, to ionize highly excited states of oxygen molecules. We identify the ionization/dissociation pathways revealing vibrational structure with ultra-high resolution ion 3D-momentum imaging spectroscopy. Furthermore, we introduce a delay between IR pulses and XUV/IR pulses to constructively or destructively interfere the ionization and dissociation pathways, thus, enabling the manipulation of both the O2+and the O+ ion yields with attosecond precision. Supported by DOE under Contract No. DE-AC02-05CH11231.

Coherent control schemes for the photoionization of neon and helium in the Extreme Ultraviolet spectral region.

PubMed

Giannessi, Luca; Allaria, Enrico; Prince, Kevin C; Callegari, Carlo; Sansone, Giuseppe; Ueda, Kiyoshi; Morishita, Toru; Liu, Chien Nan; Grum-Grzhimailo, Alexei N; Gryzlova, Elena V; Douguet, Nicolas; Bartschat, Klaus

2018-05-17

The seeded Free-Electron Laser (FEL) FERMI is the first source of short-wavelength light possessing the full coherence of optical lasers, together with the extreme power available from FELs. FERMI provides longitudinally coherent radiation in the Extreme Ultraviolet and soft x-ray spectral regions, and therefore opens up wide new fields of investigation in physics. We first propose experiments exploiting this property to provide coherent control of the photoionization of neon and helium, carry out numerical calculations to find optimum experimental parameters, and then describe how these experiments may be realized. The approach uses bichromatic illumination of a target and measurement of the products of the interaction, analogous to previous Brumer-Shapiro-type experiments in the optical spectral range. We describe operational schemes for the FERMI FEL, and simulate the conditions necessary to produce light at the fundamental and second or third harmonic frequencies, and to control the phase with respect to the fundamental. We conclude that a quantitative description of the phenomena is extremely challenging for present state-of-the-art theoretical and computational methods, and further development is necessary. Furthermore, the intensity available may already be excessive for the experiments proposed on helium. Perspectives for further development are discussed.

Evidence for a New Class of Extreme Ultraviolet Sources

NASA Technical Reports Server (NTRS)

Maoz, Dan; Ofek, Eran O.; Shemi, Amotz

1997-01-01

Most of the sources detected in the extreme ultraviolet (EUV; 100-600 A) by the ROSAT/WFC and EUVE all-sky surveys have been identified with active late-type stars and hot white dwarfs that are near enough to the Earth to escape absorption by interstellar gas. However, about 15 per cent of EUV sources are as yet unidentified with any optical counterparts. We examine whether the unidentified EUV sources may consist of the same population of late-type stars and white dwarfs. We present B and R photometry of stars in the fields of seven of the unidentified EUV sources. We detect in the optical the entire main-sequence and white dwarf population out to the greatest distances where they could still avoid absorption. We use color-magnitude diagrams to demonstrate that, in most of the fields, none of the observed stars has the colours and magnitudes of late-type dwarfs at distances less than 100 pc. Similarly, none of the observed stars is a white dwarf within 500 pc that is hot enough to be a EUV emitter. The unidentified EUV sources we study are not detected in X-rays, while cataclysmic variables, X-ray binaries, and active galactic nuclei generally are. We conclude that some of the EUV sources may be a new class of nearby objects, which are either very faint at optical bands or which mimic the colours and magnitudes of distant late-type stars or cool white dwarfs. One candidate for optically faint objects is isolated old neutron stars, slowly accreting interstellar matter. Such neutron stars are expected to be abundant in the Galaxy, and have not been unambiguously detected.

High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas

NASA Astrophysics Data System (ADS)

Musgrave, Christopher S. A.; Murakami, Takehiro; Ugomori, Teruyuki; Yoshida, Kensuke; Fujioka, Shinsuke; Nishimura, Hiroaki; Atarashi, Hironori; Iyoda, Tomokazu; Nagai, Keiji

2017-03-01

With the advent of high volume manufacturing capabilities by extreme ultraviolet lithography, constant improvements in light source design and cost-efficiency are required. Currently, light intensity and conversion efficiency (CE) measurments are obtained by charged couple devices, faraday cups etc, but also phoshpor imaging plates (IPs) (BaFBr:Eu). IPs are sensitive to light and high-energy species, which is ideal for studying extreme ultraviolet (EUV) light from laser produced plasmas (LPPs). In this work, we used IPs to observe a large angular distribution (10°-90°). We ablated a tin target by high-energy lasers (1064 nm Nd:YAG, 1010 and 1011 W/cm2) to generate the EUV light. The europium ions in the IP were trapped in a higher energy state from exposure to EUV light and high-energy species. The light intensity was angular dependent; therefore excitation of the IP depends on the angle, and so highly informative about the LPP. We obtained high-space resolution (345 μm, 0.2°) angular distribution and grazing spectrometer (5-20 nm grate) data simultaneously at different target to IP distances (103 mm and 200 mm). Two laser systems and IP types (BAS-TR and BAS-SR) were also compared. The cosine fitting values from the IP data were used to calculate the CE to be 1.6% (SD ± 0.2) at 13.5 nm 2% bandwidth. Finally, a practical assessment of IPs and a damage issue are disclosed.

CO2 laser drives extreme ultraviolet nano-lithography — second life of mature laser technology

NASA Astrophysics Data System (ADS)

Nowak, K. M.; Ohta, T.; Suganuma, T.; Fujimoto, J.; Mizoguchi, H.; Sumitani, A.; Endo, A.

2013-12-01

It was shown both theoretically and experimentally that nanosecond order laser pulses at 10.6 micron wavelength were superior for driving the Sn plasma extreme ultraviolet (EUV) source for nano-lithography for the reasons of higher conversion efficiency, lower production of debris and higher average power levels obtainable in CO2 media without serious problems of beam distortions and nonlinear effects occurring in competing solid-state lasers at high intensities. The renewed interest in such pulse format, wavelength, repetition rates in excess of 50 kHz and average power levels in excess of 18 kiloWatt has sparked new opportunities for a matured multi-kiloWatt CO2 laser technology. The power demand of EUV source could be only satisfied by a Master-Oscillator-Power-Amplifier system configuration, leading to a development of a new type of hybrid pulsed CO2 laser employing a whole spectrum of CO2 technology, such as fast flow systems and diffusion-cooled planar waveguide lasers, and relatively recent quantum cascade lasers. In this paper we review briefly the history of relevant pulsed CO2 laser technology and the requirements for multi-kiloWatt CO2 laser, intended for the laser-produced plasma EUV source, and present our recent advances, such as novel solid-state seeded master oscillator and efficient multi-pass amplifiers built on planar waveguide CO2 lasers.

Diagnosing the Prominence-Cavity Connection in the Solar Corona

NASA Astrophysics Data System (ADS)

Schmit, D. J.

The energetic equilibrium of the corona is described by a balance of heating, thermal conduction, and radiative cooling. Prominences can be described by the thermal instability of coronal energy balance which leads to the formation of cool condensations. Observationally, the prominence is surrounded by a density depleted elliptical structure known as a cavity. In this dissertation, we use extreme ultraviolet remote sensing observations of the prominence-cavity system to diagnose the static and dynamic properties of these structures. The observations are compared with numerical models for the time-dependent coronal condensation process and the time-independent corona-prominence magnetic field. To diagnose the density of the cavity, we construct a three-dimensional structural model of the corona. This structural model allows us to synthesize extreme ultraviolet emission in the corona in a way that incorporates the projection effects which arise from the optically thin plasma. This forward model technique is used to constrain a radial density profile simultaneously in the cavity and the streamer. We use a χ2 minimization to find the density model which best matches a density sensitive line ratio (observed with Hinode/Extreme ultraviolet Imaging Spectrometer) and the white light scattered intensity (observed with Mauna Loa Solar Observatory MK4 coronagraph). We use extreme ultraviolet spectra and spectral images to diagnose the dynamics of the prominence and the surrounding corona. Based on the doppler shift of extreme ultraviolet coronal emission lines, we find that there are large regions of flowing plasma which appear to occur within cavities. These line of sight flows have speeds of 10 km/s-1 and projected spatial scales of 100 Mm. Using the Solar Dynamics Observatory Atmospheric Imaging Assembly (SDO/AIA) dataset, we observe dynamic emission from the prominence-cavity system. The SDO/AIA dataset observes multiple spectral bandpasses with different temperature sensitivities. Time-dependent changes in the observed emission in these bandpass images represent changes in the thermodynamic properties of the emitting plasma. We find that the coronal region surrounding the prominence exhibits larger intensity variations (over tens of hours of observations) as compared to the streamer region. This variability is particularly strong in the cool coronal emission of the 171Å bandpass. We identify the source of this variability as strong brightening events that resemble concave-up loop segments and extend from the cool prominence plasma. Magnetic field lines are the basic structural building block of the corona. Energy and pressure balance in the corona occur along magnetic field lines. The large-scale extreme ultraviolet emission we observe in the corona is a conglomerate of many coronal loops projected along a line of sight. In order to calculate the plasma properties at a particular point in the corona, we use one-dimensional models for energy and pressure balance along field lines. In order to predict the extreme ultraviolet emission along a particular line of sight, we project these one-dimensional models onto the three-dimensional magnetic configuration provided by a MHD model for the coronal magnetic field. These results have allowed us to the establish the first comprehensive picture on the magnetic and energetic interaction of the prominence and the cavity. While the originally hypothesis that the cavity supplies mass to the prominence proved inaccurate, we cannot simply say that these structures are not related. Rather our findings suggest that the prominence and the cavity are distinct magnetic substructures that are complementary regions of a larger whole, specifically a magnetic flux rope. (Abstract shortened by UMI.).

Active Regions Blossoming

NASA Image and Video Library

2015-10-28

As a pair of active regions began to rotate into view, their towering magnetic field lines above them bloomed into a dazzling display of twisting arches (Oct. 27-28, 2015). Some of the lines reached over and connected with the neighboring active region. Active regions are usually the source of solar storms. The images were taken in a wavelength of extreme ultraviolet light. http://photojournal.jpl.nasa.gov/catalog/PIA20048

Charge Transfer Dissociation of Complex Oligosaccharides: Comparison with Collision-Induced Dissociation and Extreme Ultraviolet Dissociative Photoionization

NASA Astrophysics Data System (ADS)

Ropartz, David; Li, Pengfei; Fanuel, Mathieu; Giuliani, Alexandre; Rogniaux, Hélène; Jackson, Glen P.

2016-10-01

The structural characterization of oligosaccharides still challenges the field of analytical chemistry. Tandem mass spectrometry offers many advantages toward this aim, although the generic fragmentation method (low-energy collision-induced dissociation) shows clear limitations and is often insufficient to retrieve some essential structural information on these molecules. In this work, we present the first application of helium charge transfer dissociation (He-CTD) to characterize the structure of complex oligosaccharides. We compare this method with low-energy collision-induced dissociation and extreme-ultraviolet dissociative photoionization (XUV-DPI), which was shown previously to ensure the successful characterization of complex glycans. Similarly to what could be obtained by XUV-DPI, He-CTD provides a complete description of the investigated structures by producing many informative cross-ring fragments and no ambiguous fragmentation. Unlike XUV-DPI, which is performed at a synchrotron source, He-CTD has the undeniable advantage of being implementable in a conventional benchtop ion trap in a conventional laboratory setting.

Dynamic absorption coefficients of chemically amplified resists and nonchemically amplified resists at extreme ultraviolet

NASA Astrophysics Data System (ADS)

Fallica, Roberto; Stowers, Jason K.; Grenville, Andrew; Frommhold, Andreas; Robinson, Alex P. G.; Ekinci, Yasin

2016-07-01

The dynamic absorption coefficients of several chemically amplified resists (CAR) and non-CAR extreme ultraviolet (EUV) photoresists are measured experimentally using a specifically developed setup in transmission mode at the x-ray interference lithography beamline of the Swiss Light Source. The absorption coefficient α and the Dill parameters ABC were measured with unprecedented accuracy. In general, the α of resists match very closely with the theoretical value calculated from elemental densities and absorption coefficients, whereas exceptions are observed. In addition, through the direct measurements of the absorption coefficients and dose-to-clear values, we introduce a new figure of merit called chemical sensitivity to account for all the postabsorption chemical reaction ongoing in the resist, which also predicts a quantitative clearing volume and clearing radius, due to the photon absorption in the resist. These parameters may help provide deeper insight into the underlying mechanisms of the EUV concepts of clearing volume and clearing radius, which are then defined and quantitatively calculated.

The Hopkins Ultraviolet Telescope - Performance and calibration during the Astro-1 mission

NASA Technical Reports Server (NTRS)

Davidsen, Arthur F.; Long, Knox S.; Durrance, Samuel T.; Blair, William P.; Bowers, Charles W.; Conard, Steven J.; Feldman, Paul D.; Ferguson, Henry C.; Fountain, Glen H.; Kimble, Randy A.

1992-01-01

Results are reported of spectrophotometric observations, made with the Hopkins Ultraviolet Telescope (HUT), of 77 astronomical sources throughout the far-UV (912-1850 A) at a resolution of about 3 A, and, for a small number of sources, in the extreme UV (415-912 A) beyond the Lyman limit at a resolution of about 1.5 A. The HUT instrument and its performance in orbit are described. A HUT observation of the DA white dwarf G191-B2B is presented, and the photometric calibration curve for the instrument is derived from a comparison of the observation with a model stellar atmosphere. The sensitivity reaches a maximum at 1050 A, where 1 photon/sq cm s A yields 9.5 counts/s A, and remains within a factor of 2 of this value from 912 to 1600 A. The instrumental dark count measured on orbit was less than 0.001 counts/s A.

Ultraviolet spectroscopic breath analysis using hollow-optical fiber as gas cell

NASA Astrophysics Data System (ADS)

Iwata, T.; Katagiri, T.; Matsuura, Y.

2017-02-01

For breath analysis on ultraviolet absorption spectroscopy, an analysis system using a hollow optical fiber as gas cell is developed. The hollow optical fiber functions as a long path and extremely small volume gas cell. Firstly, the measurement sensitivity of the system is evaluated by using NO gas as a gas sample. The result shows that NO gas with 50 ppb concentration is measured by using a system with a laser-driven, high intensity light source and a 3-meter long, aluminum-coated hollow optical fiber. Then an absorption spectrum of breath sample is measured in the wavelength region of around 200-300 nm and from the spectrum, it is found that the main absorbing components in breath were H2O, isoprene, and O3 converted from O2 by radiation of ultraviolet light. Then the concentration of isoprene in breath is estimated by using multiple linear regression analysis.

An Optics Free Spectrometer for the Extreme Ultraviolet

NASA Technical Reports Server (NTRS)

Judge, D. L.; Daybell, M. D.; Hoffman, J. R.; Gruntman, M. A.; Ogawa, H. S.; Samson, J. A. R.

1994-01-01

The optics-free spectrometer is a photon spectrometer. It provides the photon spectrum of a broadband source by converting photons of energy E into electrons of energy E', according to the Einstein relation, E' = E - Ei. E, is the ionization threshold of the gas target of interest (any of the rare gases are suitable) and E is the incoming photon energy. As is evident from the above equation, only a single order spectrum is produced throughout the energy range between the first and second ionization potentials of the rare gas used. Photons with energy above the second ionization potential produce two groups of electrons, but they are readily distinguished from each other. This feature makes this device extremely useful for determining the true spectrum of a continuum source or a many line source. The principle of operation and the laboratory results obtained with a representative configuration of the optics-free spectrometer are presented.

Temporal variations of electron density and temperature in Kr/Ne/H2 photoionized plasma induced by nanosecond pulses from extreme ultraviolet source

NASA Astrophysics Data System (ADS)

Saber, I.; Bartnik, A.; Wachulak, P.; Skrzeczanowski, W.; Jarocki, R.; Fiedorowicz, H.

2017-06-01

Spectral investigations of low-temperature photoionized plasmas created in a Kr/Ne/H2 gas mixture were performed. The low-temperature plasmas were generated by gas mixture irradiation using extreme ultraviolet pulses from a laser-plasma source. Emission spectra in the ultraviolet/visible range from the photoionized plasmas contained lines that mainly corresponded to neutral atoms and singly charged ions. Temporal variations in the plasma electron temperature and electron density were studied using different characteristic emission lines at various delay times. Results, based on Kr II lines, showed that the electron temperature decreased from 1.7 to 0.9 eV. The electron densities were estimated using different spectral lines at each delay time. In general, except for the Hβ line, in which the electron density decreased from 3.78 × 1016 cm-3 at 200 ns to 5.77 × 1015 cm-3 at 2000 ns, most of the electron density values measured from the different lines were of the order of 1015 cm-3 and decreased slightly while maintaining the same order when the delay time increased. The time dependences of the measured and simulated intensities of a spectral line of interest were also investigated. The validity of the partial or full local thermodynamic equilibrium (LTE) conditions in plasma was explained based on time-resolved electron density measurements. The partial LTE condition was satisfied for delay times in the 200 ns to 1500 ns range. The results are summarized, and the dominant basic atomic processes in the gas mixture photoionized plasma are discussed.

Relativistic frequency upshift to the extreme ultraviolet regime using self-induced oscillatory flying mirrors

PubMed Central

Kim, I Jong; Pae, Ki Hong; Kim, Chul Min; Kim, Hyung Taek; Yun, Hyeok; Yun, Sang Jae; Sung, Jae Hee; Lee, Seong Ku; Yoon, Jin Woo; Yu, Tae Jun; Jeong, Tae Moon; Nam, Chang Hee; Lee, Jongmin

2012-01-01

Coherent short-wavelength radiation from laser–plasma interactions is of increasing interest in disciplines including ultrafast biomolecular imaging and attosecond physics. Using solid targets instead of atomic gases could enable the generation of coherent extreme ultraviolet radiation with higher energy and more energetic photons. Here we present the generation of extreme ultraviolet radiation through coherent high-harmonic generation from self-induced oscillatory flying mirrors—a new-generation mechanism established in a long underdense plasma on a solid target. Using a 30-fs, 100-TW Ti:sapphire laser, we obtain wavelengths as short as 4.9 nm for an optimized level of amplified spontaneous emission. Particle-in-cell simulations show that oscillatory flying electron nanosheets form in a long underdense plasma, and suggest that the high-harmonic generation is caused by reflection of the laser pulse from electron nanosheets. We expect this extreme ultraviolet radiation to be valuable in realizing a compact X-ray instrument for research in biomolecular imaging and attosecond physics. PMID:23187631

Ringfield lithographic camera

DOEpatents

Sweatt, W.C.

1998-09-08

A projection lithography camera is presented with a wide ringfield optimized so as to make efficient use of extreme ultraviolet radiation from a large area radiation source (e.g., D{sub source} {approx_equal} 0.5 mm). The camera comprises four aspheric mirrors optically arranged on a common axis of symmetry. The camera includes an aperture stop that is accessible through a plurality of partial aperture stops to synthesize the theoretical aperture stop. Radiation from a mask is focused to form a reduced image on a wafer, relative to the mask, by reflection from the four aspheric mirrors. 11 figs.

Intense XUV Radiation Sources.

DTIC Science & Technology

1987-09-30

meetings form Appendices F and H. Earlier work demonstrated the usefulness of laser generated pl -a- as intense light sources in the extreme ultraviolet...in ttile 30- 12 (tlasecr \\kas operated at 101 Hz. Far comiiparisoni ab1outI halt ini reg-ioti. tilie nuttiter oh Shots \\ serc needed to ohii iiIar I...lie pl asmhas were prod uiced h foCUSi11 titlie ou tpu t e xpu SLiFres wu thI a B R\\ sparlk sOITt re hut, at Ilie Puls front a \\d : )A6i laser (1.1004

Erosion resistant nozzles for laser plasma extreme ultraviolet (EUV) sources

DOEpatents

Kubiak, Glenn D.; Bernardez, II, Luis J.

2000-01-04

A gas nozzle having an increased resistance to erosion from energetic plasma particles generated by laser plasma sources. By reducing the area of the plasma-facing portion of the nozzle below a critical dimension and fabricating the nozzle from a material that has a high EUV transmission as well as a low sputtering coefficient such as Be, C, or Si, it has been shown that a significant reduction in reflectance loss of nearby optical components can be achieved even after exposing the nozzle to at least 10.sup.7 Xe plasma pulses.

INFRARED STUDY OF UV/EUV IRRADIATION OF NAPHTHALENE IN H2O+NH3 ICE

NASA Astrophysics Data System (ADS)

Chen, Y.-J.; Nuevo, M.; Yeh, F.-C.; Yih, T.-S.; Sun, W.-H.; Ip, W.-H.; Fung, H.-S.; Lee, Y.-Y.; Wu, C.-Y. R.

We have carried out photon irradiation study of naphthalene (C10H8), the smallest polycyclic aromatic hydrocarbon (PAH) in water and ammonia ice mixtures. Photons provided by a synchrotron radiation light source in two broad-band energy ranges in the ultraviolet/near extreme ultraviolet (4-20 eV) and the extreme ultraviolet (13-45 eV) ranges were used for the irradiation of H2O+NH3+C10H8 = 1:1:1 ice mixtures at 15K. We could identify several photo-products, namely CH4, C2H6, C3H8, CO, CO2, HNCO, OCN-, and probably quinoline (C9H7N) and phenanthridine (C13H9N). We found that the light hydrocarbons are preferably produced for the ice mixture subjected to 4-20 eV photons. However, the production yields of CO, CO2, and OCN- species seem to be higher for the mixture subjected to EUV photons (13-45 eV). Therefore, naphthalene and its photo-products appear to be more efficiently destroyed when high energy photons (E > 20 eV) are used. This has important consequences on the photochemical evolution of PAHs in astrophysical environments.

Condenser for ring-field deep-ultraviolet and extreme-ultraviolet lithography

DOEpatents

Chapman, Henry N.; Nugent, Keith A.

2001-01-01

A condenser for use with a ring-field deep ultraviolet or extreme ultraviolet lithography system. A condenser includes a ripple-plate mirror which is illuminated by a collimated beam at grazing incidence. The ripple plate comprises a plate mirror into which is formed a series of channels along an axis of the mirror to produce a series of concave surfaces in an undulating pattern. Light incident along the channels of the mirror is reflected onto a series of cones. The distribution of slopes on the ripple plate leads to a distribution of angles of reflection of the incident beam. This distribution has the form of an arc, with the extremes of the arc given by the greatest slope in the ripple plate. An imaging mirror focuses this distribution to a ring-field arc at the mask plane.

Quick Solar Outburst

NASA Image and Video Library

2017-10-23

A small eruption blew a bright, disjointed stream of plasma into space (Oct. 18, 2017). The source of the blast was just out of sight beyond the edge of the sun. Images from SOHO's coronagraph instruments show a bright loop of material heading away from the sun near this same area. The video, taken in extreme ultraviolet light, covers just two hours of activity. Movies are available at https://photojournal.jpl.nasa.gov/catalog/PIA22050

CITIUS: An infrared-extreme ultraviolet light source for fundamental and applied ultrafast science

DOE Office of Scientific and Technical Information (OSTI.GOV)

Grazioli, C.; Gauthier, D.; Ivanov, R.

2014-02-15

We present the main features of CITIUS, a new light source for ultrafast science, generating tunable, intense, femtosecond pulses in the spectral range from infrared to extreme ultraviolet (XUV). The XUV pulses (about 10{sup 5}-10{sup 8} photons/pulse in the range 14-80 eV) are produced by laser-induced high-order harmonic generation in gas. This radiation is monochromatized by a time-preserving monochromator, also allowing one to work with high-resolution bandwidth selection. The tunable IR-UV pulses (10{sup 12}-10{sup 15} photons/pulse in the range 0.4-5.6 eV) are generated by an optical parametric amplifier, which is driven by a fraction of the same laser pulse thatmore » generates high order harmonics. The IR-UV and XUV pulses follow different optical paths and are eventually recombined on the sample for pump-probe experiments. We also present the results of two pump-probe experiments: with the first one, we fully characterized the temporal duration of harmonic pulses in the time-preserving configuration; with the second one, we demonstrated the possibility of using CITIUS for selective investigation of the ultra-fast dynamics of different elements in a magnetic compound.« less

Evaluation of gratings for the Extreme Ultraviolet Explorer

NASA Technical Reports Server (NTRS)

Mrowka, Stan; Martin, Chris; Bowyer, Stuart; Malina, Roger F.

1986-01-01

Extensive grating calibration facilities have been developed at the Space Sciences Laboratory at Berkley, which are now being used for the evaluation of the gratings for the spectrometer on the Extreme Ultraviolet Explorer. Measurements of efficiency scattering and imaging quality can be made at wavelengths from 44A to 2500A.

Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling

NASA Astrophysics Data System (ADS)

Fomenkov, Igor; Brandt, David; Ershov, Alex; Schafgans, Alexander; Tao, Yezheng; Vaschenko, Georgiy; Rokitski, Slava; Kats, Michael; Vargas, Michael; Purvis, Michael; Rafac, Rob; La Fontaine, Bruno; De Dea, Silvia; LaForge, Andrew; Stewart, Jayson; Chang, Steven; Graham, Matthew; Riggs, Daniel; Taylor, Ted; Abraham, Mathew; Brown, Daniel

2017-06-01

Extreme ultraviolet (EUV) lithography is expected to succeed in 193-nm immersion multi-patterning technology for sub-10-nm critical layer patterning. In order to be successful, EUV lithography has to demonstrate that it can satisfy the industry requirements in the following critical areas: power, dose stability, etendue, spectral content, and lifetime. Currently, development of second-generation laser-produced plasma (LPP) light sources for the ASML's NXE:3300B EUV scanner is complete, and first units are installed and operational at chipmaker customers. We describe different aspects and performance characteristics of the sources, dose stability results, power scaling, and availability data for EUV sources and also report new development results.

Counter-facing plasma guns for efficient extreme ultra-violet plasma light source

NASA Astrophysics Data System (ADS)

Kuroda, Yusuke; Yamamoto, Akiko; Kuwabara, Hajime; Nakajima, Mitsuo; Kawamura, Tohru; Horioka, Kazuhiko

2013-11-01

A plasma focus system composed of a pair of counter-facing coaxial guns was proposed as a long-pulse and/or repetitive high energy density plasma source. We applied Li as the source of plasma for improvement of the conversion efficiency, the spectral purity, and the repetition capability. For operation of the system with ideal counter-facing plasma focus mode, we changed the system from simple coaxial geometry to a multi-channel configuration. We applied a laser trigger to make synchronous multi-channel discharges with low jitter. The results indicated that the configuration is promising to make a high energy density plasma with high spectral efficiency.

Low density of neutral hydrogen and helium in the local interstellar medium: Extreme Ultraviolet Explorer photometry of the Lyman continuum of the hot white dwarfs MCT 0501-2858, MCT 0455-2812, HZ 43, and GD 153

NASA Technical Reports Server (NTRS)

Vennes, Stephane; Dupuis, Jean; Bowyer, Stuart; Fontaine, Gilles; Wiercigroch, Alexandria; Jelinsky, Patrick; Wesemael, Francois; Malina, Roger

1994-01-01

The first comprehensive sky survey of the extreme ultraviolet (EUV) spectral range performed by the Extreme Ultraviolet Explorer (EUVE) has uncovered a handful of very bright sources at wavelengths longer than the He I 504 A photoionization edge. Among these objects are four white dwarfs with exceptionally low interstellar medium (ISM) column densities along the line of sight. Analysis of EUV photometry of the He-rich DO white dwarf MCT 0501-2858 and the H-rich DA white dwarf MCT 0455-2812 along one line of sight and of the DA white dwarfs HZ 43 and GD 153 near the north Galactic pole indicates that the overall minimum column density of the neutral material centered on the Sun is N(H I) = 0.5-1.0 x 10(exp 18)/sq cm. In the case of MCT 0501-2858, EUV photometric measurements provide a clear constraint to the effective temperature (60,000-70,000 K). Given these neutral hydrogen columns, the actual contribution to the density of neutral species from the immediate solar environment (the 'local fluff') would only cover a distance of approximately equals 2-3 pc (assuming an average density n(H I) = 0.1/cu cm) leaving these lines of sight almost entirely within the hot phase of the ISM. A preliminary examination of the complete EUVE long-wavelength survey indicates that these lines of sight are exceptional and set a minimum column density in the solar environment.

Evaluation and testing of image quality of the Space Solar Extreme Ultraviolet Telescope

NASA Astrophysics Data System (ADS)

Peng, Jilong; Yi, Zhong; Zhou, Shuhong; Yu, Qian; Hou, Yinlong; Wang, Shanshan

2018-01-01

For the space solar extreme ultraviolet telescope, the star point test can not be performed in the x-ray band (19.5nm band) as there is not light source of bright enough. In this paper, the point spread function of the optical system is calculated to evaluate the imaging performance of the telescope system. Combined with the actual processing surface error, such as small grinding head processing and magnetorheological processing, the optical design software Zemax and data analysis software Matlab are used to directly calculate the system point spread function of the space solar extreme ultraviolet telescope. Matlab codes are programmed to generate the required surface error grid data. These surface error data is loaded to the specified surface of the telescope system by using the communication technique of DDE (Dynamic Data Exchange), which is used to connect Zemax and Matlab. As the different processing methods will lead to surface error with different size, distribution and spatial frequency, the impact of imaging is also different. Therefore, the characteristics of the surface error of different machining methods are studied. Combining with its position in the optical system and simulation its influence on the image quality, it is of great significance to reasonably choose the processing technology. Additionally, we have also analyzed the relationship between the surface error and the image quality evaluation. In order to ensure the final processing of the mirror to meet the requirements of the image quality, we should choose one or several methods to evaluate the surface error according to the different spatial frequency characteristics of the surface error.

Condenser for ring-field deep ultraviolet and extreme ultraviolet lithography

DOEpatents

Chapman, Henry N.; Nugent, Keith A.

2002-01-01

A condenser for use with a ring-field deep ultraviolet or extreme ultraviolet lithography system. A condenser includes a ripple-plate mirror which is illuminated by a collimated or converging beam at grazing incidence. The ripple plate comprises a flat or curved plate mirror into which is formed a series of channels along an axis of the mirror to produce a series of concave surfaces in an undulating pattern. Light incident along the channels of the mirror is reflected onto a series of cones. The distribution of slopes on the ripple plate leads to a distribution of angles of reflection of the incident beam. This distribution has the form of an arc, with the extremes of the arc given by the greatest slope in the ripple plate. An imaging mirror focuses this distribution to a ring-field arc at the mask plane.

Amorphous silicon carbide coatings for extreme ultraviolet optics

NASA Technical Reports Server (NTRS)

Kortright, J. B.; Windt, David L.

1988-01-01

Amorphous silicon carbide films formed by sputtering techniques are shown to have high reflectance in the extreme ultraviolet spectral region. X-ray scattering verifies that the atomic arrangements in these films are amorphous, while Auger electron spectroscopy and Rutherford backscattering spectroscopy show that the films have composition close to stoichiometric SiC, although slightly C-rich, with low impurity levels. Reflectance vs incidence angle measurements from 24 to 1216 A were used to derive optical constants of this material, which are presented here. Additionally, the measured extreme ultraviolet efficiency of a diffraction grating overcoated with sputtered amorphous silicon carbide is presented, demonstrating the feasibility of using these films as coatings for EUV optics.

Bottom Extreme-Ultraviolet-Sensitive Coating for Evaluation of the Absorption Coefficient of Ultrathin Film

NASA Astrophysics Data System (ADS)

Hijikata, Hayato; Kozawa, Takahiro; Tagawa, Seiichi; Takei, Satoshi

2009-06-01

A bottom extreme-ultraviolet-sensitive coating (BESC) for evaluation of the absorption coefficients of ultrathin films such as extreme ultraviolet (EUV) resists was developed. This coating consists of a polymer, crosslinker, acid generator, and acid-responsive chromic dye and is formed by a conventional spin-coating method. By heating the film after spin-coating, a crosslinking reaction is induced and the coating becomes insoluble. A typical resist solution can be spin-coated on a substrate covered with the coating film. The evaluation of the linear absorption coefficients of polymer films was demonstrated by measuring the EUV absorption of BESC substrates on which various polymers were spin-coated.

Three-dimensional characterization of extreme ultraviolet mask blank defects by interference contrast photoemission electron microscopy.

PubMed

Lin, Jingquan; Weber, Nils; Escher, Matthias; Maul, Jochen; Han, Hak-Seung; Merkel, Michael; Wurm, Stefan; Schönhense, Gerd; Kleineberg, Ulf

2008-09-29

A photoemission electron microscope based on a new contrast mechanism "interference contrast" is applied to characterize extreme ultraviolet lithography mask blank defects. Inspection results show that positioning of interference destructive condition (node of standing wave field) on surface of multilayer in the local region of a phase defect is necessary to obtain best visibility of the defect on mask blank. A comparative experiment reveals superiority of the interference contrast photoemission electron microscope (Extreme UV illumination) over a topographic contrast one (UV illumination with Hg discharge lamp) in detecting extreme ultraviolet mask blank phase defects. A depth-resolved detection of a mask blank defect, either by measuring anti-node peak shift in the EUV-PEEM image under varying inspection wavelength condition or by counting interference fringes with a fixed illumination wavelength, is discussed.

Atomic processes and equation of state of high Z plasmas for EUV sources and their effects on the spatial and temporal evolution of the plasmas

NASA Astrophysics Data System (ADS)

Sasaki, Akira; Sunahara, Atushi; Furukawa, Hiroyuki; Nishihara, Katsunobu; Nishikawa, Takeshi; Koike, Fumihiro

2016-03-01

Laser-produced plasma (LPP) extreme ultraviolet (EUV) light sources have been intensively investigated due to potential application to next-generation semiconductor technology. Current studies focus on the atomic processes and hydrodynamics of plasmas to develop shorter wavelength sources at λ = 6.x nm as well as to improve the conversion efficiency (CE) of λ = 13.5 nm sources. This paper examines the atomic processes of mid-z elements, which are potential candidates for λ = 6.x nm source using n=3-3 transitions. Furthermore, a method to calculate the hydrodynamics of the plasmas in terms of the initial interaction between a relatively weak prepulse laser is presented.

Recycling of laser and plasma radiation energy for enhancement of extreme ultraviolet sources for nanolithography

NASA Astrophysics Data System (ADS)

Sizyuk, V.; Sizyuk, T.; Hassanein, A.; Johnson, K.

2018-01-01

We have developed comprehensive integrated models for detailed simulation of laser-produced plasma (LPP) and laser/target interaction, with potential recycling of the escaping laser and out-of-band plasma radiation. Recycling, i.e., returning the escaping laser and plasma radiation to the extreme ultraviolet (EUV) generation region using retroreflective mirrors, has the potential of increasing the EUV conversion efficiency (CE) by up to 60% according to our simulations. This would result in significantly reduced power consumption and/or increased EUV output. Based on our recently developed models, our High Energy Interaction with General Heterogeneous Target Systems (HEIGHTS) computer simulation package was upgraded for LPP devices to include various radiation recycling regimes and to estimate the potential CE enhancement. The upgraded HEIGHTS was used to study recycling of both laser and plasma-generated radiation and to predict possible gains in conversion efficiency compared to no-recycling LPP devices when using droplets of tin target. We considered three versions of the LPP system including a single CO2 laser, a single Nd:YAG laser, and a dual-pulse device combining both laser systems. The gains in generating EUV energy were predicted and compared for these systems. Overall, laser and radiation energy recycling showed the potential for significant enhancement in source efficiency of up to 60% for the dual-pulse system. Significantly higher CE gains might be possible with optimization of the pre-pulse and main pulse parameters and source size.

A study of the mechanical vibrations of a table-top extreme ultraviolet interference nanolithography tool.

PubMed

Prezioso, S; De Marco, P; Zuppella, P; Santucci, S; Ottaviano, L

2010-04-01

A prototype low cost table-top extreme ultraviolet (EUV) laser source (1.5 ns pulse duration, lambda=46.9 nm) was successfully employed as a laboratory scale interference nanolithography (INL) tool. Interference patterns were obtained with a simple Lloyd's mirror setup. Periodic structures on Polymethylmethacrylate/Si substrates were produced on large areas (8 mm(2)) with resolutions from 400 to 22.5 nm half pitch (the smallest resolution achieved so far with table-top EUV laser sources). The mechanical vibrations affecting both the laser source and Lloyd's setup were studied to determine if and how they affect the lateral resolution of the lithographic system. The vibration dynamics was described by a statistical model based on the assumption that the instantaneous position of the vibrating mechanical parts follows a normal distribution. An algorithm was developed to simulate the process of sample irradiation under different vibrations. The comparison between simulations and experiments allowed to estimate the characteristic amplitude of vibrations that was deduced to be lower than 50 nm. The same algorithm was used to reproduce the expected pattern profiles in the lambda/4 half pitch physical resolution limit. In that limit, a nonzero pattern modulation amplitude was obtained from the simulations, comparable to the peak-to-valley height (2-3 nm) measured for the 45 nm spaced fringes, indicating that the mechanical vibrations affecting the INL tool do not represent a limit in scaling down the resolution.

The Rise and Fall of μ Velorum: A Remarkable Flare on a Yellow Giant Star Observed with the Extreme Ultraviolet Explorer

NASA Astrophysics Data System (ADS)

Ayres, Thomas R.; Osten, Rachel A.; Brown, Alexander

1999-11-01

The close visual double μ Velorum (HD 93497; G6 III+dF) consists of a yellow giant and a fainter companion currently 2" apart. Recently μ Vel was the source of a large flare recorded by the Extreme Ultraviolet Explorer. The long 1.5 day decay phase was like the extremes seen on hyperactive RS CVn-type binaries. The primary, μ Vel A is a 3 Msolar star, in the ``rapid braking zone'' redward of G0 III. Yellow giants are not commonly reported as flare stars, perhaps because the first-crossers are relatively rare and not well represented in the observational samples. The secondary star is classified G2 V, but the 1700 Å energy distribution places it earlier on the main sequence, probably F4 or F5 V, in a class also not usually known for coronal variability. The long duration of the μ Vel event suggests that it occurred in a significantly elongated structure of moderate density, ne<~109 cm-3. If it was a magnetic plasmoid, like a coronal mass ejection on the Sun, then such events might play a role in shedding angular momentum from active evolved stars. The associated spin-down could control the activity survival time of red giants (in later stages of evolution than the first-crosser μ Vel) whose dynamos were rejunvenated by dredge-up of angular momentum from the interior, or more exotic sources, such as cannibalism of close-in substellar companions during the first or second ascent.

Ringfield lithographic camera

DOEpatents

Sweatt, William C.

1998-01-01

A projection lithography camera is presented with a wide ringfield optimized so as to make efficient use of extreme ultraviolet radiation from a large area radiation source (e.g., D.sub.source .apprxeq.0.5 mm). The camera comprises four aspheric mirrors optically arranged on a common axis of symmetry with an increased etendue for the camera system. The camera includes an aperture stop that is accessible through a plurality of partial aperture stops to synthesize the theoretical aperture stop. Radiation from a mask is focused to form a reduced image on a wafer, relative to the mask, by reflection from the four aspheric mirrors.

Intense XUV (Extreme Ultraviolet) Radiation Sources.

DTIC Science & Technology

1985-07-31

Light Sources for High ................ .29 . Resolution XUV and VUV Spectroscopy; Appendix F:’High Resolution Spectra of Laser Pl -asma Light...34."" ."."".". "," .. .". .’ Laser (1.06juMm) iol 3 Target Intensit vrV Pls htN Ta disk 3 - I O WlCnr 4. K 2.2 ns 80100209 > 1~ C 1010 109 0 40 80 120 160 200 240...acknowledges support from SERC (UK). 1. Carroll, P.K., Kennedy, E.T. and O’Sullivan, G., 1980, App. Opt. 19, 1454. 2. Nagel, D.J., Brown, C.M., Peckerar

HUBBLE IDENTIFIES SOURCE OF ULTRAVIOLET LIGHT IN AN OLD GALAXY

NASA Technical Reports Server (NTRS)

2002-01-01

Hubble Space Telescope's exquisite resolution has allowed astronomers to resolve, for the first time, hot blue stars deep inside an elliptical galaxy. The swarm of nearly 8,000 blue stars resembles a blizzard of snowflakes near the core (lower right) of the neighboring galaxy M32, located 2.5 million light-years away in the constellation Andromeda. Hubble confirms that the ultraviolet light comes from a population of extremely hot helium-burning stars at a late stage in their lives. Unlike the Sun, which burns hydrogen into helium, these old stars exhausted their central hydrogen long ago, and now burn helium into heavier elements. The observations, taken in October 1998, were made with the camera mode of the Space Telescope Imaging Spectrograph (STIS) in ultraviolet light. The STIS field of view is only a small portion of the entire galaxy, which is 20 times wider on the sky. For reference, the full moon is 70 times wider than the STIS field-of-view. The bright center of the galaxy was placed on the right side of the image, allowing fainter stars to be seen on the left side of the image. These results are to be published in the March 1, 2000 issue of The Astrophysical Journal. Thirty years ago, the first ultraviolet observations of elliptical galaxies showed that they were surprisingly bright when viewed in ultraviolet light. Before those pioneering UV observations, old groups of stars were assumed to be relatively cool and thus extremely faint in the ultraviolet. Over the years since the initial discovery of this unexpected ultraviolet light, indirect evidence has accumulated that it originates in a population of old, but hot, helium-burning stars. Now Hubble provides the first direct visual evidence. Nearby elliptical galaxies are thought to be relatively simple galaxies comprised of old stars. Because they are among the brightest objects in the Universe, this simplicity makes them useful for tracing the evolution of stars and galaxies. Credits: NASA and Thomas M. Brown, Charles W. Bowers, Randy A. Kimble, Allen V. Sweigart (NASA Goddard Space Flight Center) and Henry C. Ferguson (Space Telescope Science Institute).

Spectral lines and characteristic of temporal variations in photoionized plasmas induced with laser-produced plasma extreme ultraviolet source

NASA Astrophysics Data System (ADS)

Saber, I.; Bartnik, A.; Wachulak, P.; Skrzeczanowski, W.; Jarocki, R.; Fiedorowicz, H.

2017-11-01

Spectral lines for Kr/Ne/H2 photoionized plasma in the ultraviolet and visible (UV/Vis) wavelength ranges have been created using a laser-produced plasma (LPP) EUV source. The source is based on a double-stream gas puff target irradiated with a commercial Nd:YAG laser. The laser pulses were focused onto a gas stream, injected into a vacuum chamber synchronously with the EUV pulses. Spectral lines from photoionization in neutral Kr/Ne/H2 and up to few charged states were observed. The intense emission lines were associated with the Kr transition lines. Experimental and theoretical investigations on intensity variations for some ionic lines are presented. A decrease in the intensity with the delay time between the laser pulse and the spectrum acquisition was revealed. Electron temperature and electron density in the photoionized plasma have been estimated from the characteristic emission lines. Temperature was obtained using Boltzmann plot method, assuming that the population density of atoms and ions are considered in a local thermodynamic equilibrium (LTE). Electron density was calculated from the Stark broadening profile. The temporal evaluation of the plasma and the way of optimizing the radiation intensity of LPP EUV sources is discussed.

Method for extreme ultraviolet lithography

DOEpatents

Felter, T. E.; Kubiak, Glenn D.

1999-01-01

A method of producing a patterned array of features, in particular, gate apertures, in the size range 0.4-0.05 .mu.m using projection lithography and extreme ultraviolet (EUV) radiation. A high energy laser beam is used to vaporize a target material in order to produce a plasma which in turn, produces extreme ultraviolet radiation of a characteristic wavelength of about 13 nm for lithographic applications. The radiation is transmitted by a series of reflective mirrors to a mask which bears the pattern to be printed. The demagnified focused mask pattern is, in turn, transmitted by means of appropriate optics and in a single exposure, to a substrate coated with photoresists designed to be transparent to EUV radiation and also satisfy conventional processing methods.

Method for extreme ultraviolet lithography

DOEpatents

Felter, T. E.; Kubiak, G. D.

2000-01-01

A method of producing a patterned array of features, in particular, gate apertures, in the size range 0.4-0.05 .mu.m using projection lithography and extreme ultraviolet (EUV) radiation. A high energy laser beam is used to vaporize a target material in order to produce a plasma which in turn, produces extreme ultraviolet radiation of a characteristic wavelength of about 13 nm for lithographic applications. The radiation is transmitted by a series of reflective mirrors to a mask which bears the pattern to be printed. The demagnified focused mask pattern is, in turn, transmitted by means of appropriate optics and in a single exposure, to a substrate coated with photoresists designed to be transparent to EUV radiation and also satisfy conventional processing methods.

Thin film filter lifetesting results in the extreme ultraviolet

NASA Technical Reports Server (NTRS)

Vedder, P. W.; Vallerga, J. V.; Gibson, J. L.; Stock, J.; Siegmund, O. H. W.

1993-01-01

We present the results of the thin film filter lifetesting program conducted as part of the NASA Extreme Ultraviolet Explorer (EUVE) satellite mission. This lifetesting program is designed to monitor changes in the transmission and mechanical properties of the EUVE filters over the lifetime of the mission (fabrication, assembly, launch and operation). Witness test filters were fabricated from thin film foils identical to those used in the flight filters. The witness filters have been examined and calibrated periodically over the past seven years. The filters have been examined for evidence of pinholing, mechanical degradation, and oxidation. Absolute transmissions of the flight and witness filters have been measured in the extreme ultraviolet (EUV) over six orders of magnitude at numerous wavelengths using the Berkeley EUV Calibration Facility.

Method for plasma formation for extreme ultraviolet lithography-theta pinch

DOEpatents

Hassanein, Ahmed [Naperville, IL; Konkashbaev, Isak [Bolingbrook, IL; Rice, Bryan [Hillsboro, OR

2007-02-20

A device and method for generating extremely short-wave ultraviolet electromagnetic wave, utilizing a theta pinch plasma generator to produce electromagnetic radiation in the range of 10 to 20 nm. The device comprises an axially aligned open-ended pinch chamber defining a plasma zone adapted to contain a plasma generating gas within the plasma zone; a means for generating a magnetic field radially outward of the open-ended pinch chamber to produce a discharge plasma from the plasma generating gas, thereby producing a electromagnetic wave in the extreme ultraviolet range; a collecting means in optical communication with the pinch chamber to collect the electromagnetic radiation; and focusing means in optical communication with the collecting means to concentrate the electromagnetic radiation.

Preliminary GPS orbit determination results for the Extreme Ultraviolet Explorer

NASA Technical Reports Server (NTRS)

Gold, Kenn; Bertiger, Willy; Wu, Sien; Yunck, Tom

1993-01-01

A single-frequency Motorola Global Positioning System (GPS) receiver was launched with the Extreme Ultraviolet Explorer mission in June 1992. The receiver utilizes dual GPS antennas placed on opposite sides of the satellite to obtain full GPS coverage as it rotates during its primary scanning mission. A data set from this GPS experiment has been processed at the Jet Propulsion Laboratory with the GIPSY-OASIS 2 software package. The single-frequency, dual antenna approach and the low altitude (approximately 500 km) orbit of the satellite create special problems for the GPS orbit determination analysis. The low orbit implies that the dynamics of the spacecraft will be difficult to model, and that atmospheric drag will be an important error source. A reduced-dynamic solution technique was investigated in which ad hoc accelerations were estimated at each time step to absorb dynamic model error. In addition, a single-frequency ionospheric correction was investigated, and a cycle-slip detector was written. Orbit accuracy is currently better than 5 m. Further optimization should improve this to about 1 m.

Upgrade of beamline BL08B at Taiwan Light Source from a photon-BPM to a double-grating SGM beamline.

PubMed

Yuh, Jih Young; Lin, Shan Wei; Huang, Liang Jen; Fung, Hok Sum; Lee, Long Life; Chen, Yu Joung; Cheng, Chiu Ping; Chin, Yi Ying; Lin, Hong Ji

2015-09-01

During the last 20 years, beamline BL08B has been upgraded step by step from a photon beam-position monitor (BPM) to a testing beamline and a single-grating beamline that enables experiments to record X-ray photo-emission spectra (XPS) and X-ray absorption spectra (XAS) for research in solar physics, organic semiconductor materials and spinel oxides, with soft X-ray photon energies in the range 300-1000 eV. Demands for photon energy to extend to the extreme ultraviolet region for applications in nano-fabrication and topological thin films are increasing. The basic spherical-grating monochromator beamline was again upgraded by adding a second grating that delivers photons of energy from 80 to 420 eV. Four end-stations were designed for experiments with XPS, XAS, interstellar photoprocess systems (IPS) and extreme-ultraviolet lithography (EUVL) in the scheduled beam time. The data from these experiments show a large count rate in core levels probed and excellent statistics on background normalization in the L-edge adsorption spectrum.

Extreme Ultraviolet Explorer observations of the magnetic cataclysmic variable RE 1938-461

NASA Technical Reports Server (NTRS)

Warren, John K.; Vallerga, John V.; Mauche, Christopher W.; Mukai, Koji; Siegmund, Oswald H. W.

1993-01-01

The magnetic cataclysmic variable RE 1938-461 was observed by the Extreme Ultraviolet Explorer (EUVE) Deep Survey instrument on 1992 July 8-9 during in-orbit calibration. It was detected in the Lexan/ boron (65-190 A) band, with a quiescent count rate of 0.0062 +/- 0.0017/s, and was not detected in the aluminum/carbon (160-360 A) band. The Lexan/boron count rate is lower than the corresponding ROSAT wide-field camera Lexan/boron count rate. This is consistent with the fact that the source was in a low state during an optical observation performed just after the EUVE observation, whereas it was in an optical high state during the ROSAT observation. The quiescent count rates are consistent with a virtual cessation of accretion. Two transient events lasting about 1 hr occurred during the Lexan/boron pointing, the second at a count rate of 0.050 +/- 0.006/s. This appears to be the first detection of an EUV transient during the low state of a magnetic cataclysmic variable. We propose two possible explanations for the transient events.

Tuning extreme ultraviolet emission for optimum coupling with multilayer mirrors for future lithography through control of ionic charge states

DOE Office of Scientific and Technical Information (OSTI.GOV)

Ohashi, Hayato, E-mail: ohashi@cc.utsunomiya-u.ac.jp; Higashiguchi, Takeshi, E-mail: higashi@cc.utsunomiya-u.ac.jp; Suzuki, Yuhei

2014-01-21

We report on the identification of the optimum plasma conditions for a laser-produced plasma source for efficient coupling with multilayer mirrors at 6.x nm for beyond extreme ultraviolet lithography. A small shift to lower energies of the peak emission for Nd:YAG laser-produced gadolinium plasmas was observed with increasing laser power density. Charge-defined emission spectra were observed in electron beam ion trap (EBIT) studies and the charge states responsible identified by use of the flexible atomic code (FAC). The EBIT spectra displayed a larger systematic shift of the peak wavelength of intense emission at 6.x nm to longer wavelengths with increasingmore » ionic charge. This combination of spectra enabled the key ion stage to be confirmed as Gd{sup 18+}, over a range of laser power densities, with contributions from Gd{sup 17+} and Gd{sup 19+} responsible for the slight shift to longer wavelengths in the laser-plasma spectra. The FAC calculation also identified the origin of observed out-of-band emission and the charge states responsible.« less

Initial results from the extreme ultraviolet explorer

NASA Technical Reports Server (NTRS)

Bowyer, S.; Malina, R. F.

1993-01-01

Data obtained during the first five months of calibration and science operation of the Extreme Ultraviolet Explorer (EUVE) are presented. Spectra of an extragalactic object were obtained; the object is detectable to wavelenghts longer than 100 A, demonstrating that extragalactic EUV astronomy is possible. Spectra of a hot white dwarf, and a late-type star in quiescence and flaring are shown as examples of the type of spectrographic data obtainable with EUVE. Other objects for which broad band photometric mode data have been obtained and analyzed include an RS CVn star and several late-type stars. The backgrounds in the EUVE detectors are quite low and the character of the diffuse astronomical EUV background has been investigated using these very low rates. Evidence is presented showing that, contrary to previously published reports, EUVE is about three times more sensitive than the English Wide Field Camera in the short wavelength bandpass covered by both instruments. Only limited information has been extracted from the longer bandpasses coered only by EUVE. Nonetheless, the brightest EUV source in the sky, a B star, has been discovered and is detected only in these longer bandpasses.

Galileo Ultraviolet Spectrometer experiment

NASA Technical Reports Server (NTRS)

Hord, C. W.; Mcclintock, W. E.; Stewart, A. I. F.; Barth, C. A.; Esposito, L. W.; Thomas, G. E.; Sandel, B. R.; Hunten, D. M.; Broadfoot, A. L.; Shemansky, D. E.

1992-01-01

The Galileo ultraviolet spectrometer experiment uses data obtained by the Ultraviolet Spectrometer (UVS) mounted on the pointed orbiter scan platform and from the Extreme Ultraviolet Spectrometer (EUVS) mounted on the spinning part of the orbiter with the field of view perpendicular to the spin axis. The UVS is a Ebert-Fastie design that covers the range 113-432 nm with a wavelength resolution of 0.7 nm below 190 and 1.3 nm at longer wavelengths. The UVS spatial resolution is 0.4 deg x 0.1 deg for illuminated disk observations and 1 deg x 0.1 deg for limb geometries. The EUVS is a Voyager design objective grating spectrometer, modified to cover the wavelength range from 54 to 128 nm with wavelength resolution 3.5 nm for extended sources and 1.5 nm for point sources and spatial resolution of 0.87 deg x 0.17 deg. The EUVS instrument will follow up on the many Voyager UVS discoveries, particularly the sulfur and oxygen ion emissions in the Io torus and molecular and atomic hydrogen auroral and airglow emissions from Jupiter. The UVS will obtain spectra of emission, absorption, and scattering features in the unexplored, by spacecraft, 170-432 nm wavelength region. The UVS and EUVS instruments will provide a powerful instrument complement to investigate volatile escape and surface composition of the Galilean satellites, the Io plasma torus, micro- and macro-properties of the Jupiter clouds, and the composition structure and evolution of the Jupiter upper atmosphere.

XUV ionization of aligned molecules

NASA Astrophysics Data System (ADS)

Kelkensberg, F.; Rouzée, A.; Siu, W.; Gademann, G.; Johnsson, P.; Lucchini, M.; Lucchese, R. R.; Vrakking, M. J. J.

2011-11-01

New extreme-ultraviolet (XUV) light sources such as high-order-harmonic generation (HHG) and free-electron lasers (FELs), combined with laser-induced alignment techniques, enable novel methods for making molecular movies based on measuring molecular frame photoelectron angular distributions. Experiments are presented where CO2 molecules were impulsively aligned using a near-infrared laser and ionized using femtosecond XUV pulses obtained by HHG. Measured electron angular distributions reveal contributions from four orbitals and the onset of the influence of the molecular structure.

Extreme ultraviolet spectroscopy of low pressure helium microwave driven discharges

NASA Astrophysics Data System (ADS)

Espinho, Susana; Felizardo, Edgar; Tatarova, Elena; Alves, Luis Lemos

2016-09-01

Surface wave driven discharges are reliable plasma sources that can produce high levels of vacuum and extreme ultraviolet radiation (VUV and EUV). The richness of the emission spectrum makes this type of discharge a possible alternative source in EUV/VUV radiation assisted applications. However, due to challenging experimental requirements, publications concerning EUV radiation emitted by microwave plasmas are scarce and a deeper understanding of the main mechanisms governing the emission of radiation in this spectral range is required. To this end, the EUV radiation emitted by helium microwave driven plasmas operating at 2.45 GHz has been studied for low pressure conditions. Spectral lines from excited helium atoms and ions were detected via emission spectroscopy in the EUV/VUV regions. Novel data concerning the spectral lines observed in the 23 - 33 nm wavelength range and their intensity behaviour with variation of the discharge operational conditions are presented. The intensity of all the spectral emissions strongly increases with the microwave power delivered to the plasma up to 400 W. Furthermore, the intensity of all the ion spectral emissions in the EUV range decreases by nearly one order of magnitude as the pressure was raised from 0.2 to 0.5 mbar. Work funded by FCT - Fundacao para a Ciencia e a Tecnologia, under Project UID/FIS/50010/2013 and grant SFRH/BD/52412/2013 (PD-F APPLAuSE).

The Extreme Ultraviolet Explorer science instruments development - Lessons learned

NASA Technical Reports Server (NTRS)

Malina, Roger F.; Battel, S.

1991-01-01

The science instruments development project for the Extreme Ultraviolet Explorer (EUVE) satellite is reviewed. Issues discussed include the philosophical basis of the program, the establishment of a tight development team, the approach to planning and phasing activities, the handling of the most difficult technical problems, and the assessment of the work done during the preimplemntation period of the project.

Extreme ultraviolet and X-ray spectroheliograph for OSO-H

NASA Technical Reports Server (NTRS)

Sterk, A. A.; Kieser, F.; Peck, S.; Knox, E.

1972-01-01

A complex scientific instrument was designed, fabricated, tested, and calibrated for launch onboard OSO-H. This instrument consisted of four spectroheliographs and an X-ray polarimeter. The instrument is designed to study solar radiation at selected wavelengths in the X-ray and the extreme ultraviolet ranges, make observations at the H-alpha wavelength, and measure the degree of polarization of X-ray emissions.

Solar-B Mission Extreme Ultraviolet (EUV) Imaging Spectrometer (EIS) Instrument Components

NASA Technical Reports Server (NTRS)

Doschek, George A.

2002-01-01

This Monthly Progress Report covers the reporting period August 2002 of the Detailed Design and Development through Launch plus Thirty Days, Phase C/D, for selected components and subsystems of the Extreme ultraviolet Imaging Spectrometer (EIS) instrument, hereafter referred to as EIS Instrument Components. This document contains the program status through the reporting period and forecasts the status for the upcoming reporting period.

SOLAR-B Mission Extreme Ultraviolet (EUV) Imaging Spectrometer (EIS) Instrument Components

NASA Technical Reports Server (NTRS)

Doschek, George A.

2001-01-01

This Monthly Progress Report covers the reporting period through June 2001, Phase C/D, Detailed Design and Development Through Launch Plus Thirty Days, for selected components and subsystems of the Extreme ultraviolet Imaging Spectrometer (EIS) instrument, hereafter referred to as EIS Instrument Components. This document contains the program status through the reporting period and forecasts the status for the upcoming reporting period.

SOLAR-B Mission Extreme Ultraviolet (EUV) Imaging Spectrometer (EIS) Instrument Components

NASA Technical Reports Server (NTRS)

Doschek, George A.

2001-01-01

This Monthly Progress Report covers the reporting period July 2001 of the Detailed Design and Development through Launch plus Thirty Days, Phase C/D, for selected components and subsystems of the Extreme Ultraviolet Imaging Spectrometer (EIS) instrument, hereafter referred to as EIS Instrument Components. This document contains the program status through the reporting period and forecasts the status for the upcoming reporting period.

The Extreme Ultraviolet Explorer - Optics fabrication and performance

NASA Technical Reports Server (NTRS)

Green, J.; Finley, D.; Bowyer, S.; Malina, R. F.

1986-01-01

The fabrication methods, testing and evaluation techniques, and performance results are presented for the mirrors for the Extreme Ultraviolet Explorer (EUVE). The finest mirror produced to date has a measured half energy width of 8 arcsec at optical wavelengths. With a polished nickel surface, the telescope throughput was 35 percent at 44 A and 60 percent at 256 A. The surface roughness is 20 A rms.

Agitated Active Region

NASA Image and Video Library

2016-10-11

An active region just rotating into view gave us a perfect view of the tussle of magnetic field lines above it (Oct. 10-11, 2016). The particles spiraling along the magnetic field lines become visible in extreme ultraviolet light, helping us to see the struggle going on. There were no eruptions during this period, although active regions are usually the source for solar storms. The video clip covers just one day's worth of activity. Movies are available at http://photojournal.jpl.nasa.gov/catalog/PIA21109

XUV ionization of aligned molecules

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kelkensberg, F.; Siu, W.; Gademann, G.

2011-11-15

New extreme-ultraviolet (XUV) light sources such as high-order-harmonic generation (HHG) and free-electron lasers (FELs), combined with laser-induced alignment techniques, enable novel methods for making molecular movies based on measuring molecular frame photoelectron angular distributions. Experiments are presented where CO{sub 2} molecules were impulsively aligned using a near-infrared laser and ionized using femtosecond XUV pulses obtained by HHG. Measured electron angular distributions reveal contributions from four orbitals and the onset of the influence of the molecular structure.

Breakthroughs in photonics 2013: X-ray optics

DOE PAGES

Soufli, Regina

2014-04-01

Here, this review discusses the latest advances in extreme ultraviolet/X-ray optics development, which are motivated by the availability and demands of new X-ray sources and scientific and industrial applications. Among the breakthroughs highlighted are the following: i) fabrication, metrology, and mounting technologies for large-area optical substrates with improved figure, roughness, and focusing properties; ii) multilayer coatings with especially optimized layer properties, achieving improved reflectance, stability, and out-of-band suppression; and iii) nanodiffractive optics with improved efficiency and resolution.

Doing Solar Science With Extreme-ultraviolet and X-ray High Resolution Imaging Spectroscopy

NASA Astrophysics Data System (ADS)

Doschek, G. A.

2005-12-01

In this talk I will demonstrate how high resolution extreme-ultraviolet (EUV) and/or X-ray imaging spectroscopy can be used to provide unique information for solving several current key problems of the solar atmosphere, e.g., the morphology and reconnection site of solar flares, the structure of the transition region, and coronal heating. I will describe the spectra that already exist relevant to these problems and what the shortcomings of the data are, and how an instrument such as the Extreme-ultraviolet Imaging Spectrometer (EIS) on Solar-B as well as other proposed spectroscopy missions such as NEXUS and RAM will improve on the existing observations. I will discuss a few particularly interesting properties of the spectra and atomic data for highly ionized atoms that are important for the science problems.

Energy deposition in ultrathin extreme ultraviolet resist films: extreme ultraviolet photons and keV electrons

NASA Astrophysics Data System (ADS)

Kyser, David F.; Eib, Nicholas K.; Ritchie, Nicholas W. M.

2016-07-01

The absorbed energy density (eV/cm3) deposited by extreme ultraviolet (EUV) photons and electron beam (EB) high-keV electrons is proposed as a metric for characterizing the sensitivity of EUV resist films. Simulations of energy deposition are used to calculate the energy density as a function of the incident aerial flux (EUV: mJ/cm2, EB: μC/cm2). Monte Carlo calculations for electron exposure are utilized, and a Lambert-Beer model for EUV absorption. The ratio of electron flux to photon flux which results in equivalent energy density is calculated for a typical organic chemically amplified resist film and a typical inorganic metal-oxide film. This ratio can be used to screen EUV resist materials with EB measurements and accelerate advances in EUV resist systems.

Bidirectional reflectance distribution function of diffuse extreme ultraviolet scatterers and extreme ultraviolet baffle materials.

PubMed

Newell, M P; Keski-Kuha, R A

1997-08-01

Bidirectional reflectance distribution function (BRDF) measurements of a number of diffuse extreme ultraviolet (EUV) scatterers and EUV baffle materials have been performed with the Goddard EUV scatterometer. BRDF data are presented for white Spectralon SRS-99 at 121.6 nm; the data exhibit a non-Lambertian nature and a total hemispherical reflectance lower than 0.15. Data are also presented for an evaporated Cu black sample, a black Spectralon SRS-02 sample, and a Martin Optical Black sample at wavelengths of 58.4 and 121.6 nm and for angles of incidence of 15 degrees and 45 degrees. Overall Martin Optical Black exhibited the lowest BRDF characteristic, with a total hemispherical reflectance of the order of 0.01 and measured BRDF values as low as 2 x 10(-3) sr(-1).

High average power, highly brilliant laser-produced plasma source for soft X-ray spectroscopy.

PubMed

Mantouvalou, Ioanna; Witte, Katharina; Grötzsch, Daniel; Neitzel, Michael; Günther, Sabrina; Baumann, Jonas; Jung, Robert; Stiel, Holger; Kanngiesser, Birgit; Sandner, Wolfgang

2015-03-01

In this work, a novel laser-produced plasma source is presented which delivers pulsed broadband soft X-radiation in the range between 100 and 1200 eV. The source was designed in view of long operating hours, high stability, and cost effectiveness. It relies on a rotating and translating metal target and achieves high stability through an on-line monitoring device using a four quadrant extreme ultraviolet diode in a pinhole camera arrangement. The source can be operated with three different laser pulse durations and various target materials and is equipped with two beamlines for simultaneous experiments. Characterization measurements are presented with special emphasis on the source position and emission stability of the source. As a first application, a near edge X-ray absorption fine structure measurement on a thin polyimide foil shows the potential of the source for soft X-ray spectroscopy.

Telescience - Concepts and contributions to the Extreme Ultraviolet Explorer mission

NASA Technical Reports Server (NTRS)

Marchant, Will; Dobson, Carl; Chakrabarti, Supriya; Malina, Roger F.

1987-01-01

It is shown how the contradictory goals of low-cost and fast data turnaround characterizing the Extreme Ultraviolet Explorer (EUVE) mission can be achieved via the early use of telescience style transparent tools and simulations. The use of transparent tools reduces the parallel development of capability while ensuring that valuable prelaunch experience is not lost in the operations phase. Efforts made to upgrade the 'EUVE electronics' simulator are described.

Contrasting behavior of covalent and molecular carbon allotropes exposed to extreme ultraviolet and soft x-ray free-electron laser radiation

NASA Astrophysics Data System (ADS)

Toufarová, M.; Hájková, V.; Chalupský, J.; Burian, T.; Vacík, J.; Vorlíček, V.; Vyšín, L.; Gaudin, J.; Medvedev, N.; Ziaja, B.; Nagasono, M.; Yabashi, M.; Sobierajski, R.; Krzywinski, J.; Sinn, H.; Störmer, M.; Koláček, K.; Tiedtke, K.; Toleikis, S.; Juha, L.

2017-12-01

All carbon materials, e.g., amorphous carbon (a-C) coatings and C60 fullerene thin films, play an important role in short-wavelength free-electron laser (FEL) research motivated by FEL optics development and prospective nanotechnology applications. Responses of a-C and C60 layers to the extreme ultraviolet (SPring-8 Compact SASE Source in Japan) and soft x-ray (free-electron laser in Hamburg) free-electron laser radiation are investigated by Raman spectroscopy, differential interference contrast, and atomic force microscopy. A remarkable difference in the behavior of covalent (a-C) and molecular (C60) carbonaceous solids is demonstrated under these irradiation conditions. Low thresholds for ablation of a fullerene crystal (estimated to be around 0.15 eV/atom for C60 vs 0.9 eV/atom for a-C in terms of the absorbed dose) are caused by a low cohesive energy of fullerene crystals. An efficient mechanism of the removal of intact C60 molecules from the irradiated crystal due to Coulomb repulsion of fullerene-cage cation radicals formed by the ionizing radiation is revealed by a detailed modeling.

Contrasting behavior of covalent and molecular carbon allotropes exposed to extreme ultraviolet and soft x-ray free-electron laser radiation

DOE PAGES

Toufarová, M.; Hájková, V.; Chalupský, J.; ...

2017-12-04

All carbon materials, e.g., amorphous carbon (a-C) coatings and C 60 fullerene thin films, play an important role in short-wavelength free-electron laser (FEL) research motivated by FEL optics development and prospective nanotechnology applications. We investigate responses of a-C and C 60 layers to the extreme ultraviolet (SPring-8 Compact SASE Source in Japan) and soft x-ray (free-electron laser in Hamburg) free-electron laser radiation by Raman spectroscopy, differential interference contrast, and atomic force microscopy. A remarkable difference in the behavior of covalent (a-C) and molecular ( C 60 ) carbonaceous solids is demonstrated under these irradiation conditions. Low thresholds for ablation ofmore » a fullerene crystal (estimated to be around 0.15 eV/atom for C 60 vs 0.9 eV/atom for a-C in terms of the absorbed dose) are caused by a low cohesive energy of fullerene crystals. An efficient mechanism of the removal of intact C 60 molecules from the irradiated crystal due to Coulomb repulsion of fullerene-cage cation radicals formed by the ionizing radiation is revealed by a detailed modeling.« less

Contrasting behavior of covalent and molecular carbon allotropes exposed to extreme ultraviolet and soft x-ray free-electron laser radiation

DOE Office of Scientific and Technical Information (OSTI.GOV)

Toufarová, M.; Hájková, V.; Chalupský, J.

All carbon materials, e.g., amorphous carbon (a-C) coatings and C 60 fullerene thin films, play an important role in short-wavelength free-electron laser (FEL) research motivated by FEL optics development and prospective nanotechnology applications. We investigate responses of a-C and C 60 layers to the extreme ultraviolet (SPring-8 Compact SASE Source in Japan) and soft x-ray (free-electron laser in Hamburg) free-electron laser radiation by Raman spectroscopy, differential interference contrast, and atomic force microscopy. A remarkable difference in the behavior of covalent (a-C) and molecular ( C 60 ) carbonaceous solids is demonstrated under these irradiation conditions. Low thresholds for ablation ofmore » a fullerene crystal (estimated to be around 0.15 eV/atom for C 60 vs 0.9 eV/atom for a-C in terms of the absorbed dose) are caused by a low cohesive energy of fullerene crystals. An efficient mechanism of the removal of intact C 60 molecules from the irradiated crystal due to Coulomb repulsion of fullerene-cage cation radicals formed by the ionizing radiation is revealed by a detailed modeling.« less

Development of extreme ultraviolet and soft x-ray multilayer optics for scientific studies with femtosecond/attosecond sources

DOE Office of Scientific and Technical Information (OSTI.GOV)

Aquila, Andrew Lee

The development of multilayer optics for extreme ultraviolet (EUV) radiation has led to advancements in many areas of science and technology, including materials studies, EUV lithography, water window microscopy, plasma imaging, and orbiting solar physics imaging. Recent developments in femtosecond and attosecond EUV pulse generation from sources such as high harmonic generation lasers, combined with the elemental and chemical specificity provided by EUV radiation, are opening new opportunities to study fundamental dynamic processes in materials. Critical to these efforts is the design and fabrication of multilayer optics to transport, focus, shape and image these ultra-fast pulses This thesis describes themore » design, fabrication, characterization, and application of multilayer optics for EUV femtosecond and attosecond scientific studies. Multilayer mirrors for bandwidth control, pulse shaping and compression, tri-material multilayers, and multilayers for polarization control are described. Characterization of multilayer optics, including measurement of material optical constants, reflectivity of multilayer mirrors, and metrology of reflected phases of the multilayer, which is critical to maintaining pulse size and shape, were performed. Two applications of these multilayer mirrors are detailed in the thesis. In the first application, broad bandwidth multilayers were used to characterize and measure sub-100 attosecond pulses from a high harmonic generation source and was performed in collaboration with the Max-Planck institute for Quantum Optics and Ludwig- Maximilians University in Garching, Germany, with Professors Krausz and Kleineberg. In the second application, multilayer mirrors with polarization control are useful to study femtosecond spin dynamics in an ongoing collaboration with the T-REX group of Professor Parmigiani at Elettra in Trieste, Italy. As new ultrafast x-ray sources become available, for example free electron lasers, the multilayer designs described in this thesis can be extended to higher photon energies, and such designs can be used with those sources to enable new scientific studies, such as molecular bonding, phonon, and spin dynamics.« less

Extreme Ultraviolet Explorer Science Operation Center

NASA Technical Reports Server (NTRS)

Wong, G. S.; Kronberg, F. A.; Meriwether, H. D.; Wong, L. S.; Grassi, C. L.

1993-01-01

The EUVE Science Operations Center (ESOC) is a satellite payload operations center for the Extreme Ultraviolet Explorer project, located on the Berkeley campus of the University of California. The ESOC has the primary responsibility for commanding the EUVE telescopes and monitoring their telemetry. The ESOC is one of a very few university-based satellite operations facilities operating with NASA. This article describes the history, operation, and advantages of the ESOC as an on-campus operations center.

Femtosecond-pulse-driven electron-excited extreme-ultraviolet lasers in Be-like ions.

PubMed

Hooker, S M; Harris, S E

1995-10-01

A suggestion for the generation of extreme-ultraviolet (XUV) laser radiation based on tunneling ionization and subsequent electron excitation of Deltan not equal 0 transitions is described. The favorable scaling of the required intensity of the pump laser with the output XUV wavelength is compared with that exhibited by XUV lasers ased on Deltan = 0 transitions. Calculations for Be-like Ne predict signif icant gain at 14.1 nm.

Direct index of refraction measurements at extreme-ultraviolet and soft-x-ray wavelengths.

PubMed

Rosfjord, Kristine; Chang, Chang; Miyakawa, Ryan; Barth, Holly; Attwood, David

2006-03-10

Coherent radiation from undulator beamlines has been used to directly measure the real and imaginary parts of the index of refraction of several materials at both extreme-ultraviolet and soft-x-ray wavelengths. Using the XOR interferometer, we measure the refractive indices of silicon and ruthenium, essential materials for extreme-ultraviolet lithography. Both materials are tested at wavelength (13.4 nm) and across silicon's L2 (99.8 eV) and L3 (99.2 eV) absorption edges. We further extend this direct phase measurement method into the soft-x-ray region, where measurements of chromium and vanadium are performed around their L3 absorption edges at 574.1 and 512.1 eV, respectively. These are the first direct measurements, to our knowledge, of the real part of the index of refraction made in the soft-x-ray region.

Titania may produce abiotic oxygen atmospheres on habitable exoplanets

PubMed Central

Narita, Norio; Enomoto, Takafumi; Masaoka, Shigeyuki; Kusakabe, Nobuhiko

2015-01-01

The search for habitable exoplanets in the Universe is actively ongoing in the field of astronomy. The biggest future milestone is to determine whether life exists on such habitable exoplanets. In that context, oxygen in the atmosphere has been considered strong evidence for the presence of photosynthetic organisms. In this paper, we show that a previously unconsidered photochemical mechanism by titanium (IV) oxide (titania) can produce abiotic oxygen from liquid water under near ultraviolet (NUV) lights on the surface of exoplanets. Titania works as a photocatalyst to dissociate liquid water in this process. This mechanism offers a different source of a possibility of abiotic oxygen in atmospheres of exoplanets from previously considered photodissociation of water vapor in upper atmospheres by extreme ultraviolet (XUV) light. Our order-of-magnitude estimation shows that possible amounts of oxygen produced by this abiotic mechanism can be comparable with or even more than that in the atmosphere of the current Earth, depending on the amount of active surface area for this mechanism. We conclude that titania may act as a potential source of false signs of life on habitable exoplanets. PMID:26354078

Titania may produce abiotic oxygen atmospheres on habitable exoplanets.

PubMed

Narita, Norio; Enomoto, Takafumi; Masaoka, Shigeyuki; Kusakabe, Nobuhiko

2015-09-10

The search for habitable exoplanets in the Universe is actively ongoing in the field of astronomy. The biggest future milestone is to determine whether life exists on such habitable exoplanets. In that context, oxygen in the atmosphere has been considered strong evidence for the presence of photosynthetic organisms. In this paper, we show that a previously unconsidered photochemical mechanism by titanium (IV) oxide (titania) can produce abiotic oxygen from liquid water under near ultraviolet (NUV) lights on the surface of exoplanets. Titania works as a photocatalyst to dissociate liquid water in this process. This mechanism offers a different source of a possibility of abiotic oxygen in atmospheres of exoplanets from previously considered photodissociation of water vapor in upper atmospheres by extreme ultraviolet (XUV) light. Our order-of-magnitude estimation shows that possible amounts of oxygen produced by this abiotic mechanism can be comparable with or even more than that in the atmosphere of the current Earth, depending on the amount of active surface area for this mechanism. We conclude that titania may act as a potential source of false signs of life on habitable exoplanets.

Near infrared and extreme ultraviolet light pulses induced modifications of ultrathin Co films

NASA Astrophysics Data System (ADS)

Kisielewski, Jan; Sveklo, Iosif; Kurant, Zbigniew; Bartnik, Andrzej; Jakubowski, Marcin; Dynowska, ElŻbieta; Klinger, Dorota; Sobierajski, Ryszard; Wawro, Andrzej; Maziewski, Andrzej

2017-05-01

We report on comparative study of magnetic properties of Pt/Co/Pt trilayers after irradiation with different light sources. Ultrathin Pt/Co/Pt films were deposited by molecular beam epitaxy technique on sapphire (0001) substrates. Pt buffers were grown at room temperature (RT) and at 750°C (high temperature, HT). The samples were irradiated with a broad range of light energy densities (up to film ablation) using two different single pulse irradiation sources: (i) 40 fs laser with 800 nm wavelength and (ii) 3 ns laser-plasma source of extreme ultraviolet (EUV) with the most intense emission centered at 11 nm. The light pulse-driven irreversible structural and as a consequence, magnetic modifications were investigated using polar magneto-optical Kerr effect-based microscopy and atomic and magnetic force microscopies. The light pulse-induced transitions from the out-of-plane to in-plane magnetization state, and from in-plane to out-of-plane, were observed for both types of samples and irradiation methods. Diagrams of the magnetic states as a function of the Co layer thickness and energy density of the absorbed femtosecond pulses were constructed for the samples with both the RT and HT buffers. The energy density range responsible for the creation of the out-of-plane magnetization was wider for the HT than for RT buffer. This is correlated with the higher (for HT) crystalline quality and much smoother Pt/Co surface deduced from the X-ray diffraction studies. Submicrometer magnetic domains were observed in the irradiated region while approaching the out-of-plane magnetization state. Changes of Pt/Co/Pt structures are discussed for both types of light pulses.

Extreme-ultraviolet observations of global coronal wave rotation

DOE Office of Scientific and Technical Information (OSTI.GOV)

Attrill, G. D. R.; Long, D. M.; Green, L. M.

2014-11-20

We present evidence of global coronal wave rotation in EUV data from SOHO/EIT, STEREO/EUVI, and SDO/AIA. The sense of rotation is found to be consistent with the helicity of the source region (clockwise for positive helicity, anticlockwise for negative helicity), with the source regions hosting sigmoidal structures. We also study two coronal wave events observed by SDO/AIA where no clear rotation (or sigmoid) is observed. The selected events show supporting evidence that they all originate with flux rope eruptions. We make comparisons across this set of observations (both with and without clear sigmoidal structures). On examining the magnetic configuration ofmore » the source regions, we find that the nonrotation events possess a quadrupolar magnetic configuration. The coronal waves that do show a rotation originate from bipolar source regions.« less

Studying Resist Stochastics with the Multivariate Poisson Propagation Model

DOE PAGES

Naulleau, Patrick; Anderson, Christopher; Chao, Weilun; ...

2014-01-01

Progress in the ultimate performance of extreme ultraviolet resist has arguably decelerated in recent years suggesting an approach to stochastic limits both in photon counts and material parameters. Here we report on the performance of a variety of leading extreme ultraviolet resist both with and without chemical amplification. The measured performance is compared to stochastic modeling results using the Multivariate Poisson Propagation Model. The results show that the best materials are indeed nearing modeled performance limits.

The effect of viewing angle on the spectral behavior of a Gd plasma source near 6.7 nm

DOE Office of Scientific and Technical Information (OSTI.GOV)

O'Gorman, Colm; Li Bowen; Cummins, Thomas

2012-04-02

We have demonstrated the effect of viewing angle on the extreme ultraviolet (EUV) emission spectra of gadolinium (Gd) near 6.7 nm. The spectra are shown to have a strong dependence on viewing angle when produced with a laser pulse duration of 10 ns, which may be attributed to absorption by low ion stages of Gd and an angular variation in the ion distribution. Absorption effects are less pronounced at a 150-ps pulse duration due to reduced opacity resulting from plasma expansion. Thus for evaluating source intensity, it is necessary to allow for variation with both viewing angle and target orientation.

Swords to plowshares: Shock wave applications to advanced lithography

DOE Office of Scientific and Technical Information (OSTI.GOV)

Trucano, T.G.; Grady, D.E.; Kubiak, G.D.

1995-03-01

Extreme UltraViolet Lithography (EUVL) seeks to apply radiation in a wavelength region centered near 13 nm to produce microcircuits having features sizes 0.1 micron or less. A critical requirement for the commercial application of this technology is the development of an economical, compact source of this radiation which is suitable for lithographic applications. A good candidate is a laser-plasma source, which is generated by the interaction of an intermediate intensity laser pulse (up to 10{sup 12} W/cm{sup 2}) with a metallic target. While such a source has radiative characteristics which satisfy the needs of an EUVL source, the debris generatedmore » during the laser-target interaction strikes at the economy of the source. Here, the authors review the use of concepts and computer modeling, originally developed for hypervelocity impact analysis, to study this problem.« less

Photon-counting detector arrays based on microchannel array plates. [for image enhancement

NASA Technical Reports Server (NTRS)

Timothy, J. G.

1975-01-01

The recent development of the channel electron multiplier (CEM) and its miniaturization into the microchannel array plate (MCP) offers the possibility of fully combining the advantages of the photographic and photoelectric detection systems. The MCP has an image-intensifying capability and the potential of being developed to yield signal outputs superior to those of conventional photomultipliers. In particular, the MCP has a photon-counting capability with a negligible dark-count rate. Furthermore, the MCP can operate stably and efficiently at extreme-ultraviolet and soft X-ray wavelengths in a windowless configuration or can be integrated with a photo-cathode in a sealed tube for use at ultraviolet and visible wavelengths. The operation of one- and two-dimensional photon-counting detector arrays based on the MCP at extreme-ultraviolet wavelengths is described, and the design of sealed arrays for use at ultraviolet and visible wavelengths is briefly discussed.

Configuration and calibration of a flat field grating spectrometer in the wavelength range 7-60 Å with a Manson ultrasoft x-ray source

NASA Astrophysics Data System (ADS)

Yang, Y.; Shi, Z.; Fei, Z.; Jin, X.; Xiao, J.; Hutton, R.; Zou, Y.

2011-06-01

An ultrasoft x-ray and extreme ultraviolet spectrometer built and calibrated in the wavelength range of 7-60 Å is reported here. Details of the alignment of this flat field spectrometer with both a laser and a telescope are presented. The light path function rather than a standard calibration function, i.e. a polynomial function, is introduced as the fit function, which gives good agreement with the spectrometer design values and makes the calibration more reliable when extended to the region outside the points used for calibration, compared with a standard calibration function. The calibration results of a Manson ultrasoft x-ray source (model 2) with source targets of Cu, Fe and Ti are presented with all the peaks marked.

A stand-alone compact EUV microscope based on gas-puff target source.

PubMed

Torrisi, Alfio; Wachulak, Przemyslaw; Węgrzyński, Łukasz; Fok, Tomasz; Bartnik, Andrzej; Parkman, Tomáš; Vondrová, Šárka; Turňová, Jana; Jankiewicz, Bartłomiej J; Bartosewicz, Bartosz; Fiedorowicz, Henryk

2017-02-01

We report on a very compact desk-top transmission extreme ultraviolet (EUV) microscope based on a laser-plasma source with a double stream gas-puff target, capable of acquiring magnified images of objects with a spatial (half-pitch) resolution of sub-50 nm. A multilayer ellipsoidal condenser is used to focus and spectrally narrow the radiation from the plasma, producing a quasi-monochromatic EUV radiation (λ = 13.8 nm) illuminating the object, whereas a Fresnel zone plate objective forms the image. Design details, development, characterization and optimization of the EUV source and the microscope are described and discussed. Test object and other samples were imaged to demonstrate superior resolution compared to visible light microscopy. © 2016 The Authors Journal of Microscopy © 2016 Royal Microscopical Society.

A Triumvirate: Three Coronal Holes

NASA Image and Video Library

2015-09-10

Three substantial coronal holes rotated across the face of the Sun the week of Sept. 8-10, 2015 as seen by NASA Solar Dynamics Observatory. Coronal holes are areas where the Sun magnetic field is open and a source of streaming solar wind. They appear darker in extreme ultraviolet light because there is less material in the hole areas being imaged in this specific wavelength of light. It is a little unusual to have three coronal holes at the same time, but neither is it a rare occurrence. http://photojournal.jpl.nasa.gov/catalog/PIA19950

Bright Loops at 171

NASA Technical Reports Server (NTRS)

2007-01-01

STEREO was able to capture bright loops in exquisite detail as they were arcing above an active region (May 26, 2007) over an 18 hour period. What we are actually seeing are charged particles spinning along magnetic field lines that extend above the Sun's surface. Active regions are areas of intense magnetic activity and often the source of solar storms. In fact, the clip ends with a flourish in which a small coronal mass ejection (CME) blows out into space. This is from the STEREO Ahead spacecraft at the 171 Angstroms wavelength in extreme ultraviolet light.

Data indexing techniques for the EUVE all-sky survey

NASA Technical Reports Server (NTRS)

Lewis, J.; Saba, V.; Dobson, C.

1992-01-01

This poster describes techniques developed for manipulating large full-sky data sets for the Extreme Ultraviolet Explorer project. The authors have adapted the quatrilateralized cubic sphere indexing algorithm to allow us to efficiently store and process several types of large data sets, such as full-sky maps of photon counts, exposure time, and count rates. A variation of this scheme is used to index sparser data such as individual photon events and viewing times for selected areas of the sky, which are eventually used to create EUVE source catalogs.

Measurements of hydrogen gas stopping efficiency for tin ions from laser-produced plasma

NASA Astrophysics Data System (ADS)

Abramenko, D. B.; Spiridonov, M. V.; Krainov, P. V.; Krivtsun, V. M.; Astakhov, D. I.; Medvedev, V. V.; van Kampen, M.; Smeets, D.; Koshelev, K. N.

2018-04-01

Experimental studies of stopping of ion fluxes from laser-produced plasma by a low-pressure gas atmosphere are presented. A modification of the time-of-flight spectroscopy technique is proposed for the stopping cross-sectional measurements in the ion energy range of 0.1-10 keV. The application of the proposed technique is demonstrated for Sn ion stopping by H2 gas. This combination of elements is of particular importance for the development of plasma-based sources of extreme ultraviolet radiation for lithographic applications.

Prospective EUV observations of hot DA white dwarfs with the EUV Explorer

NASA Technical Reports Server (NTRS)

Finley, David S.; Malina, Roger F.; Bowyer, Stuart

1987-01-01

The Extreme Ultraviolet Explorer (EUVE) will perform a high sensitivity EUV all-sky survey. A major category of sources which will be detected with the EUVE instruments consists of hot white dwarfs. Detailed preliminary studies of synthetic EUV observations of white dwarfs have been carried out using the predicted EUVE instrumental response functions. Using available information regarding space densities of white dwarfs and the distribution of neutral hydrogen in the interstellar medium, the numbers of DA white dwarfs which will be detectable in the different EUV bandpasses have been estimated.

Thin metal film and multilayers experiment (A0138-3)

NASA Technical Reports Server (NTRS)

Delaboudiniere, J. P.; Berset, J. M.

1984-01-01

The sources of degradation of in state of the art and newly developed components and testing the usefulness of the concept of storing experiment samples in dry nitrogen under launch and space vacuum conditions during reentry mission phase were investigated. Ultraviolet (UV) and extreme ultraviolet (EUV) experiments suffer degradations during space missions of even 1 month duration. It is suggested that the degradation is due to condensation of outgassing products, followed by solar induced polymerization, however, penetrating charged particles are also known to produce volume effects. Degradation may also start immediately after manufacturing of the component due to oxidation, moisture, or chemical corrosion by atmospheric constituents such as CO2 and SO2. When the filters are used as windows for gas absorption cells or gas filters, or when they define the instrumental bandwidth by themselves. The effects of mechanical degradation by thermal cycling and/or dust may cause a dramatic impact.

DUV or EUV: that is the question

NASA Astrophysics Data System (ADS)

Williamson, David M.

2000-11-01

Lord Rayleigh's well-known equations for resolution and depth of focus indicate that resolution is better improved by reducing the wavelength of light rather than by increasing the numerical aperture (NA) of the projection optics, particularly when NA is approaching its physical limit of 1.0 in air (or vacuum). Vector aerial image simulations of diffraction-limited Deep Ultraviolet (DUV) and Extreme Ultraviolet (EUV) lithographic systems verify this simple view, even though Rayleigh's constants in Microlithography are not constant because of a variety of image enhancement techniques that attempt to compensate for the shortcomings of the aerial image when it is pushed to the limit. The aerial image is not the whole story, however. The competition between DUV and EUV systems will be decided more by economic and technological factors such as risk, time and cost of development and cost of ownership. These in turn depend on cost, availability and quality of light sources, refracting materials, photoresists and reticles.

Results from the calibration of the Extreme Ultraviolet Explorer instruments

NASA Technical Reports Server (NTRS)

Welsh, Barry Y.; Jelinsky, Pat; Vedder, Peter W.; Vallerga, John V.; Finley, David S.; Malina, Roger F.

1991-01-01

The paper describes the main features and selected results of the calibration of the scientific instruments to be flown on the Extreme Ultraviolet Explorer in 1991. The instrument payload includes three grazing incidence scanning telescopes and an EUV spectrometer/deep survey instrument covering the spectral region 70-800 A. The measured imaging characteristics, the effective areas, and the details of spectral responses of the instruments are presented. Diagrams of the cross-sectional views of the scanning telescope and the deep-survey/spectrometer telescope are included.

Universal EUV in-band intensity detector

DOEpatents

Berger, Kurt W.

2004-08-24

Extreme ultraviolet light is detected using a universal in-band detector for detecting extreme ultraviolet radiation that includes: (a) an EUV sensitive photodiode having a diode active area that generates a current responsive to EUV radiation; (b) one or more mirrors that reflects EUV radiation having a defined wavelength(s) to the diode active area; and (c) a mask defining a pinhole that is positioned above the diode active area, wherein EUV radiation passing through the pinhole is restricted substantially to illuminating the diode active area.

A NOISE ADAPTIVE FUZZY EQUALIZATION METHOD FOR PROCESSING SOLAR EXTREME ULTRAVIOLET IMAGES

DOE Office of Scientific and Technical Information (OSTI.GOV)

Druckmueller, M., E-mail: druckmuller@fme.vutbr.cz

A new image enhancement tool ideally suited for the visualization of fine structures in extreme ultraviolet images of the corona is presented in this paper. The Noise Adaptive Fuzzy Equalization method is particularly suited for the exceptionally high dynamic range images from the Atmospheric Imaging Assembly instrument on the Solar Dynamics Observatory. This method produces artifact-free images and gives significantly better results than methods based on convolution or Fourier transform which are often used for that purpose.

The creation of radiation dominated plasmas using laboratory extreme ultra-violet lasers

NASA Astrophysics Data System (ADS)

Tallents, G. J.; Wilson, S.; West, A.; Aslanyan, V.; Lolley, J.; Rossall, A. K.

2017-06-01

Ionization in experiments where solid targets are irradiated by high irradiance extreme ultra-violet (EUV) lasers is examined. Free electron degeneracy effects on ionization in the presence of a high EUV flux of radiation is shown to be important. Overlap of the physics of such plasmas with plasma material under compression in indirect inertial fusion is explored. The design of the focusing optics needed to achieve high irradiance (up to 1014 Wcm-2) using an EUV capillary laser is presented.

The extreme ultraviolet explorer mission

NASA Technical Reports Server (NTRS)

Malina, R. F.; Bowyer, S.

1988-01-01

The science design goals and engineering implementation for the Extreme Ultraviolet Explorer (EUVE) science payload are discussed. The primary scientific goal of the EUVE payload is to carry out an all-sky survey in the 100- to 900-A band of the spectrum. Another goal of the mission is to demonstrate the use of a scientific platform in near-earth orbit. EUVE data will be used to study the distribution of EUV stars in the neighborhood of the sun and the emission physics responsible for the EUV mission.

Active galaxies observed during the Extreme Ultraviolet Explorer all-sky survey

NASA Technical Reports Server (NTRS)

Marshall, H. L.; Fruscione, A.; Carone, T. E.

1995-01-01

We present observations of active galactic nuclei (AGNs) obtained with the Extreme Ultraviolet Explorer (EUVE) during the all-sky survey. A total of 13 sources were detected at a significance of 2.5 sigma or better: seven Seyfert galaxies, five BL Lac objects, and one quasar. The fraction of BL Lac objects is higher in our sample than in hard X-ray surveys but is consistent with the soft X-ray Einstein Slew Survey, indicating that the main reason for the large number of BL Lac objects in the extreme ulktraviolet (EUV) and soft X-ray bands is their steeper X-ray spectra. We show that the number of AGNs observed in both the EUVE and ROSAT Wide Field Camera surveys can readily be explained by modelling the EUV spectra with a simple power law in the case of BL Lac objects and with an additional EUV excess in the case of Seyferts and quasars. Allowing for cold matter absorption in Seyfert galaxy hosts drive up the inferred average continuum slope to 2.0 +/- 0.5 (at 90% confidence), compared to a slope of 1.0 usually found from soft X-ray data. If Seyfert galaxies without EUV excesses form a significant fraction of the population, then the average spectrum of those with bumps should be even steeper. We place a conservative limit on neutral gas in BL Lac objects: N(sub H) less than 10(exp 20)/sq cm.

Multistep Ionization of Argon Clusters in Intense Femtosecond Extreme Ultraviolet Pulses

DOE Office of Scientific and Technical Information (OSTI.GOV)

Bostedt, C.; Thomas, H.; Hoener, M.

The interaction of intense extreme ultraviolet femtosecond laser pulses ({lambda}=32.8 nm) from the FLASH free electron laser (FEL) with clusters has been investigated by means of photoelectron spectroscopy and modeled by Monte Carlo simulations. For laser intensities up to 5x10{sup 13} W/cm{sup 2}, we find that the cluster ionization process is a sequence of direct electron emission events in a developing Coulomb field. A nanoplasma is formed only at the highest investigated power densities where ionization is frustrated due to the deep cluster potential. In contrast with earlier studies in the IR and vacuum ultraviolet spectral regime, we find nomore » evidence for electron emission from plasma heating processes.« less

High-order harmonics measured by the photon statistics of the infrared driving-field exiting the atomic medium.

PubMed

Tsatrafyllis, N; Kominis, I K; Gonoskov, I A; Tzallas, P

2017-04-27

High-order harmonics in the extreme-ultraviolet spectral range, resulting from the strong-field laser-atom interaction, have been used in a broad range of fascinating applications in all states of matter. In the majority of these studies the harmonic generation process is described using semi-classical theories which treat the electromagnetic field of the driving laser pulse classically without taking into account its quantum nature. In addition, for the measurement of the generated harmonics, all the experiments require diagnostics in the extreme-ultraviolet spectral region. Here by treating the driving laser field quantum mechanically we reveal the quantum-optical nature of the high-order harmonic generation process by measuring the photon number distribution of the infrared light exiting the harmonic generation medium. It is found that the high-order harmonics are imprinted in the photon number distribution of the infrared light and can be recorded without the need of a spectrometer in the extreme-ultraviolet.

High-order harmonics measured by the photon statistics of the infrared driving-field exiting the atomic medium

PubMed Central

Tsatrafyllis, N.; Kominis, I. K.; Gonoskov, I. A.; Tzallas, P.

2017-01-01

High-order harmonics in the extreme-ultraviolet spectral range, resulting from the strong-field laser-atom interaction, have been used in a broad range of fascinating applications in all states of matter. In the majority of these studies the harmonic generation process is described using semi-classical theories which treat the electromagnetic field of the driving laser pulse classically without taking into account its quantum nature. In addition, for the measurement of the generated harmonics, all the experiments require diagnostics in the extreme-ultraviolet spectral region. Here by treating the driving laser field quantum mechanically we reveal the quantum-optical nature of the high-order harmonic generation process by measuring the photon number distribution of the infrared light exiting the harmonic generation medium. It is found that the high-order harmonics are imprinted in the photon number distribution of the infrared light and can be recorded without the need of a spectrometer in the extreme-ultraviolet. PMID:28447616

Extreme-ultraviolet-initiated high-order harmonic generation in Ar+

NASA Astrophysics Data System (ADS)

Clarke, D. D. A.; van der Hart, H. W.; Brown, A. C.

2018-02-01

We employ the R matrix with time dependence method to investigate extreme-ultraviolet-initiated high-order harmonic generation (XIHHG) in Ar+. Using a combination of extreme-ultraviolet (XUV, 92 nm, 3 ×1012W cm-2 ) and time-delayed, infrared (IR, 800 nm, 3 ×1014W cm-2 ) laser pulses, we demonstrate that control over both the mechanism and timing of ionization can afford significant enhancements in the yield of plateau and subthreshold harmonics alike. The presence of the XUV pulse is also shown to alter the relative contribution of different electron emission pathways. Manifestation of the Ar+ electronic structure is found in the appearance of a pronounced Cooper minimum. Interferences among the outer-valence 3 p and inner-valence 3 s electrons are found to incur only a minor suppression of the harmonic intensities, at least for the present combination of XUV and IR laser light. Additionally, the dependence of the XIHHG efficiency on time delay is discussed and rationalized with the aid of classical trajectory simulations.

Extreme ultraviolet (EUV) and FUV calibration facility for special sensor ultraviolet limb imager (SSULI)

NASA Astrophysics Data System (ADS)

Boyer, Craig N.; Osterman, Steven N.; Thonnard, Stefan E.; McCoy, Robert P.; Williams, J. Z.; Parker, S. E.

1994-09-01

A facility for calibrating far ultraviolet and extreme ultraviolet instruments has recently been completed at the Naval Research Laboratory. Our vacuum calibration vessel is 2-m in length, 1.67-m in diameter, and can accommodate optical test benches up to 1.2-m wide by 1.5-m in length. A kinematically positioned frame with four axis precision pointing capability of 10 microns for linear translation and .01 degrees for rotation is presently used during vacuum optical calibration of SSULI. The chamber was fabricated from 304 stainless steel and polished internally to reduce surface outgassing. A dust-free environment is maintained at the rear of the vacuum chamber by enclosing the 2-m hinged vacuum access door in an 8 ft. by 8 ft. class 100 clean room. Every effort was made to obtain an oil-free environment within the vacuum vessel. Outgassing products are continually monitored with a 1 - 200 amu residual gas analyzer. An oil-free claw and vane pump evacuates the chamber to 10-2 torr through 4 in. diameter stainless steel roughing lines. High vacuum is achieved and maintained with a magnetically levitated 480 l/s turbo pump and a 3000 l/s He4 cryopump. Either of two vacuum monochrometers, a 1-m f/10.4 or a 0.2-m f/4.5 are coaxially aligned with the optical axis of the chamber and are used to select single UV atomic resonance lines from a windowless capillary or penning discharge UV light source. A calibrated channeltron detector is coaxially mounted with the SSULI detector during calibration. All vacuum valves, the cooling system for the cryopump compressor, and the roughing pump are controlled through optical fibers which are interfaced to a computer through a VME board. Optical fibers were chosen to ensure that complete electrical isolation is maintained between the computer and the vacuum system valves-solenoids and relays.

Widely tunable two-colour seeded free-electron laser source for resonant-pump resonant-probe magnetic scattering

PubMed Central

Ferrari, Eugenio; Spezzani, Carlo; Fortuna, Franck; Delaunay, Renaud; Vidal, Franck; Nikolov, Ivaylo; Cinquegrana, Paolo; Diviacco, Bruno; Gauthier, David; Penco, Giuseppe; Ribič, Primož Rebernik; Roussel, Eleonore; Trovò, Marco; Moussy, Jean-Baptiste; Pincelli, Tommaso; Lounis, Lounès; Manfredda, Michele; Pedersoli, Emanuele; Capotondi, Flavio; Svetina, Cristian; Mahne, Nicola; Zangrando, Marco; Raimondi, Lorenzo; Demidovich, Alexander; Giannessi, Luca; De Ninno, Giovanni; Danailov, Miltcho Boyanov; Allaria, Enrico; Sacchi, Maurizio

2016-01-01

The advent of free-electron laser (FEL) sources delivering two synchronized pulses of different wavelengths (or colours) has made available a whole range of novel pump–probe experiments. This communication describes a major step forward using a new configuration of the FERMI FEL-seeded source to deliver two pulses with different wavelengths, each tunable independently over a broad spectral range with adjustable time delay. The FEL scheme makes use of two seed laser beams of different wavelengths and of a split radiator section to generate two extreme ultraviolet pulses from distinct portions of the same electron bunch. The tunability range of this new two-colour source meets the requirements of double-resonant FEL pump/FEL probe time-resolved studies. We demonstrate its performance in a proof-of-principle magnetic scattering experiment in Fe–Ni compounds, by tuning the FEL wavelengths to the Fe and Ni 3p resonances. PMID:26757813

Modeling high-efficiency extreme ultraviolet etched multilayer phase-shift masks

NASA Astrophysics Data System (ADS)

Sherwin, Stuart; Neureuther, Andrew; Naulleau, Patrick

2017-10-01

Achieving high-throughput extreme ultraviolet (EUV) patterning remains a major challenge due to low source power; phase-shift masks can help solve this challenge for dense features near the resolution limit by creating brighter images than traditional absorber masks when illuminated with the same source power. We explore applications of etched multilayer phase-shift masks for EUV lithography, both in the current-generation 0.33 NA and next-generation 0.55 NA systems. We derive analytic formulas for the thin-mask throughput gains, which are 2.42× for lines and spaces and 5.86× for contacts compared with an absorber mask with dipole and quadrupole illumination, respectively. Using rigorous finite-difference time-domain simulations, we quantify variations in these gains by pitch and orientation, finding 87% to 113% of the thin-mask value for lines and spaces and a 91% to 99% for contacts. We introduce an edge placement error metric, which accounts for CD errors, relative feature motion, and telecentricity errors, and use this metric both to optimize mask designs for individual features and to explore which features can be printed on the same mask. Furthermore, we find that although partial coherence shrinks the process window, at an achievable sigma of 0.2 we obtain a depth of focus of 340 nm and an exposure latitude of 39.2%, suggesting that partial coherence will not limit the feasibility of this technology. Finally, we show that many problems such as sensitivity to etch uniformity can be greatly mitigated using a central obscuration in the imaging pupil.

The extreme ultraviolet spectra of low-redshift radio-loud quasars

NASA Astrophysics Data System (ADS)

Punsly, Brian; Reynolds, Cormac; Marziani, Paola; O'Dea, Christopher P.

2016-07-01

This paper reports on the extreme ultraviolet (EUV) spectrum of three low-redshift (z ˜ 0.6) radio-loud quasars, 3C 95, 3C 57 and PKS 0405-123. The spectra were obtained with the Cosmic Origins Spectrograph of the Hubble Space Telescope. The bolometric thermal emission, Lbol, associated with the accretion flow is a large fraction of the Eddington limit for all of these sources. We estimate the long-term time-averaged jet power, overline{Q}, for the three sources. overline{Q}/L_{bol}, is shown to lie along the correlation of overline{Q}/L_{bol}, and αEUV found in previous studies of the EUV continuum of intermediate and high-redshift quasars, where the EUV continuum flux density between 1100 and 700 Å is defined by F_{ν } ˜ ν ^{-α _{EUV}}. The high Eddington ratios of the three quasars extend the analysis into a wider parameter space. Selecting quasars with high Eddington ratios has accentuated the statistical significance of the partial correlation analysis of the data. Namely, the correlation of overline{Q}/L_{bol} and αEUV is fundamental, and the correlation of overline{Q} and αEUV is spurious at a very high statistical significance level (99.8 per cent). This supports the regulating role of ram pressure of the accretion flow in magnetically arrested accretion models of jet production. In the process of this study, we use multifrequency and multiresolution Very Large Array radio observations to determine that one of the bipolar jets in 3C 57 is likely frustrated by galactic gas that keeps the jet from propagating outside the host galaxy.

Protection of extreme ultraviolet lithography masks. II. Showerhead flow mitigation of nanoscale particulate contamination [Protection of EUV lithography masks II: Showerhead flow mitigation of nanoscale particulate contamination

DOE PAGES

Klebanoff, Leonard E.; Torczynski, John R.; Geller, Anthony S.; ...

2015-03-27

An analysis is presented of a method to protect the reticle (mask) in an extreme ultraviolet (EUV) mask inspection tool using a showerhead plenum to provide a continuous flow of clean gas over the surface of a reticle. The reticle is suspended in an inverted fashion (face down) within a stage/holder that moves back and forth over the showerhead plenum as the reticle is inspected. It is essential that no particles of 10-nm diameter or larger be deposited on the reticle during inspection. Particles can originate from multiple sources in the system, and mask protection from each source is explicitlymore » analyzed. The showerhead plate has an internal plenum with a solid conical wall isolating the aperture. The upper and lower surfaces of the plate are thin flat sheets of porous-metal material. These porous sheets form the top and bottom showerheads that supply the region between the showerhead plate and the reticle and the region between the conical aperture and the Optics Zone box with continuous flows of clean gas. The model studies show that the top showerhead provides robust reticle protection from particles of 10-nm diameter or larger originating from the Reticle Zone and from plenum surfaces contaminated by exposure to the Reticle Zone. Protection is achieved with negligible effect on EUV transmission. Furthermore, the bottom showerhead efficiently protects the reticle from nanoscale particles originating from the Optics Zone.« less

Extreme ultraviolet patterned mask inspection performance of advanced projection electron microscope system for 11nm half-pitch generation

NASA Astrophysics Data System (ADS)

Hirano, Ryoichi; Iida, Susumu; Amano, Tsuyoshi; Watanabe, Hidehiro; Hatakeyama, Masahiro; Murakami, Takeshi; Suematsu, Kenichi; Terao, Kenji

2016-03-01

Novel projection electron microscope optics have been developed and integrated into a new inspection system named EBEYE-V30 ("Model EBEYE" is an EBARA's model code) , and the resulting system shows promise for application to half-pitch (hp) 16-nm node extreme ultraviolet lithography (EUVL) patterned mask inspection. To improve the system's inspection throughput for 11-nm hp generation defect detection, a new electron-sensitive area image sensor with a high-speed data processing unit, a bright and stable electron source, and an image capture area deflector that operates simultaneously with the mask scanning motion have been developed. A learning system has been used for the mask inspection tool to meet the requirements of hp 11-nm node EUV patterned mask inspection. Defects are identified by the projection electron microscope system using the "defectivity" from the characteristics of the acquired image. The learning system has been developed to reduce the labor and costs associated with adjustment of the detection capability to cope with newly-defined mask defects. We describe the integration of the developed elements into the inspection tool and the verification of the designed specification. We have also verified the effectiveness of the learning system, which shows enhanced detection capability for the hp 11-nm node.

How calibration and reference spectra affect the accuracy of absolute soft X-ray solar irradiance measured by the SDO/EVE/ESP during high solar activity

NASA Astrophysics Data System (ADS)

Didkovsky, Leonid; Wieman, Seth; Woods, Thomas

2016-10-01

The Extreme ultraviolet Spectrophotometer (ESP), one of the channels of SDO's Extreme ultraviolet Variability Experiment (EVE), measures solar irradiance in several EUV and soft x-ray (SXR) bands isolated using thin-film filters and a transmission diffraction grating, and includes a quad-diode detector positioned at the grating zeroth-order to observe in a wavelength band from about 0.1 to 7.0 nm. The quad diode signal also includes some contribution from shorter wavelength in the grating's first-order and the ratio of zeroth-order to first-order signal depends on both source geometry, and spectral distribution. For example, radiometric calibration of the ESP zeroth-order at the NIST SURF BL-2 with a near-parallel beam provides a different zeroth-to-first-order ratio than modeled for solar observations. The relative influence of "uncalibrated" first-order irradiance during solar observations is a function of the solar spectral irradiance and the locations of large Active Regions or solar flares. We discuss how the "uncalibrated" first-order "solar" component and the use of variable solar reference spectra affect determination of absolute SXR irradiance which currently may be significantly overestimated during high solar activity.

Evolution analysis of EUV radiation from laser-produced tin plasmas based on a radiation hydrodynamics model

PubMed Central

Su, M. G.; Min, Q.; Cao, S. Q.; Sun, D. X.; Hayden, P.; O’Sullivan, G.; Dong, C. Z.

2017-01-01

One of fundamental aims of extreme ultraviolet (EUV) lithography is to maximize brightness or conversion efficiency of laser energy to radiation at specific wavelengths from laser produced plasmas (LPPs) of specific elements for matching to available multilayer optical systems. Tin LPPs have been chosen for operation at a wavelength of 13.5 nm. For an investigation of EUV radiation of laser-produced tin plasmas, it is crucial to study the related atomic processes and their evolution so as to reliably predict the optimum plasma and experimental conditions. Here, we present a simplified radiation hydrodynamic model based on the fluid dynamic equations and the radiative transfer equation to rapidly investigate the evolution of radiation properties and dynamics in laser-produced tin plasmas. The self-absorption features of EUV spectra measured at an angle of 45° to the direction of plasma expansion have been successfully simulated and explained, and the evolution of some parameters, such as the plasma temperature, ion distribution and density, expansion size and velocity, have also been evaluated. Our results should be useful for further understanding of current research on extreme ultraviolet and soft X-ray source development for applications such as lithography, metrology and biological imaging. PMID:28332621

In situ focus characterization by ablation technique to enable optics alignment at an XUV FEL source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Gerasimova, N.; Dziarzhytski, S.; Weigelt, H.

2013-06-15

In situ focus characterization is demonstrated by working at an extreme ultraviolet (XUV) free-electron laser source using ablation technique. Design of the instrument reported here allows reaching a few micrometres resolution along with keeping the ultrahigh vacuum conditions and ensures high-contrast visibility of ablative imprints on optically transparent samples, e.g., PMMA. This enables on-line monitoring of the beam profile changes and thus makes possible in situ alignment of the XUV focusing optics. A good agreement between focal characterizations retrieved from in situ inspection of ablative imprints contours and from well-established accurate ex situ analysis with Nomarski microscope has been observedmore » for a typical micro-focus experiment.« less

Quantitative Evaluation of Hard X-ray Damage to Biological Samples using EUV Ptychography

NASA Astrophysics Data System (ADS)

Baksh, Peter; Odstrcil, Michal; Parsons, Aaron; Bailey, Jo; Deinhardt, Katrin; Chad, John E.; Brocklesby, William S.; Frey, Jeremy G.

2017-06-01

Coherent diffractive imaging (CDI) has become a standard method on a variety of synchrotron beam lines. The high brilliance short wavelength radiation from these sources can be used to reconstruct attenuation and relative phase of a sample with nanometre resolution via CDI methods. However, the interaction between the sample and high energy ionising radiation can cause degradation to sample structure. We demonstrate, using a laboratory based high harmonic generation (HHG) based extreme ultraviolet (EUV) source, imaging a sample of hippocampal neurons using the ptychography method. The significant increase in contrast of the sample in the EUV light allows identification of damage induced from exposure to 7.3 keV photons, without causing any damage to the sample itself.

STEREO's Extreme UltraViolet Imager (EUVI)

NASA Technical Reports Server (NTRS)

2007-01-01

At a pixel resolution of 2048x2048, the STEREO EUVI instrument provides views of the Sun in ultraviolet light that rivals the full-disk views of SOHO/EIT. This image is through the 171 Angstrom (ultraviolet) filter which is characteristic of iron ions (missing eight and nine electrons) at 1 million degrees. There is a short data gap in the latter half of the movie that creates a freeze and then jump in the data view. This is a movie of the Sun in 171 Angstrom ultraviolet light. The time frame is late January, 2007

Extreme ultraviolet observations of G191-B2B and the local interstellar medium with the Hopkins Ultraviolet Telescope

NASA Technical Reports Server (NTRS)

Kimble, Randy A.; Davidsen, Arthur F.; Blair, William P.; Bowers, Charles W.; Van Dyke Dixon, W.; Durrance, Samuel T.; Feldman, Paul D.; Ferguson, Henry C.; Henry, Richard C.; Kriss, Gerard A.

1993-01-01

During the Astro-l mission in 1990 December, the Hopkins Ultraviolet Telescope (HUT) was used to observe the extreme ultraviolet spectrum (415-912 A) of the hot DA white dwarf GI91-B2B. Absorption by neutral helium shortward of the 504 A He I absorption edge is clearly detected in the raw spectrum. Model fits to the observed spectrum require interstellar neutral helium and neutral hydrogen column densities of 1.45 +/- 0.065 x 10 exp 17/sq cm and 1.69 +/- 0.12 x 10 exp 18/sq cm, respectively. Comparison of the neutral columns yields a direct assessment of the ionization state of the local interstellar cloud surrounding the Sun. The neutral hydrogen to helium ratio of 11.6 +/- 1.0 observed by HUT strongly contradicts the widespread view that hydrogen is much more ionized than helium in the local interstellar medium, a view which has motivated some exotic theoretical explanations for the supposed high ionization.

KSC-98pc1086

NASA Image and Video Library

1998-09-14

KENNEDY SPACE CENTER, FLA. The International Extreme Ultraviolet Hitchhiker-3 (IEH-3), one of the payloads for the STS-95 mission, is prepared for launch in the Multi-Payload Processing Facility. IEH-3 is comprised of seven experiments, including one that will be deployed on Flight Day 3. It is the small, non-recoverable Petite Amateur Navy Satellite (PANSAT) which will store and transmit digital communications. Other IEH investigations are the Solar Constant Experiment (SOLCON), Solar Extreme Ultraviolet Hitchhiker (SEH), Spectrograph/Telescope for Astronomical Research (STAR-LITE), Ultraviolet Spectrograph Telescope for Astronomical Research (UVSTAR), Consortium for Materials Development in Space Complex Autonomous Payloads (CONCAP-IV) for growing thin films via physical vapor transport, and two Get-Away Special (GAS) canister experiments. The experiments will be mounted on a hitchhiker bridge in Discovery's payload bay

SOHO EIT Carrington maps from synoptic full-disk data

NASA Technical Reports Server (NTRS)

Thompson, B. J.; Newmark, J. S.; Gurman, J. B.; Delaboudiniere, J. P.; Clette, F.; Gibson, S. E.

1997-01-01

The solar synoptic maps, obtained from observations carried out since May 1996 by the extreme-ultraviolet imaging telescope (EIT) onboard the Solar and Heliospheric Observatory (SOHO), are presented. The maps were constructed for each Carrington rotation with the calibrated data. The off-limb maps at 1.05 and 1.10 solar radii were generated for three coronal lines using the standard applied to coronagraph synoptic maps. The maps reveal several aspects of the solar structure over the entire rotation and are used in the whole sun month modeling campaign. @txt extreme-ultraviolet imaging telescope

FAST TRACK COMMUNICATION: Inhomogeneous charge redistribution in Xe clusters exposed to an intense extreme ultraviolet free electron laser

NASA Astrophysics Data System (ADS)

Iwayama, H.; Sugishima, A.; Nagaya, K.; Yao, M.; Fukuzawa, H.; Motomura, K.; Liu, X.-J.; Yamada, A.; Wang, C.; Ueda, K.; Saito, N.; Nagasono, M.; Tono, K.; Yabashi, M.; Ishikawa, T.; Ohashi, H.; Kimura, H.; Togashi, T.

2010-08-01

The emission of highly charged ions from Xe clusters exposed to intense extreme ultraviolet laser pulses (λ ~ 52 nm) from the free electron laser in Japan was investigated using ion momentum spectroscopy. With increasing average cluster size, we observed multiply charged ions Xez + up to z = 3. From kinetic energy distributions, we found that multiply charged ions were generated near the cluster surface. Our results suggest that charges are inhomogeneously redistributed in the cluster to lower the total energy stored in the clusters.

Multilayer films with sharp, stable interfaces for use in EUV and soft X-ray application

DOEpatents

Barbee, Jr., Troy W.; Bajt, Sasa

2002-01-01

The reflectivity and thermal stability of Mo/Si (molybdenum/silicon) multilayer films, used in soft x-ray and extreme ultraviolet region, is enhanced by deposition of a thin layer of boron carbide (e.g., B.sub.4 C) between alternating layers of Mo and Si. The invention is useful for reflective coatings for soft X-ray and extreme ultraviolet optics, multilayer for masks, coatings for other wavelengths and multilayers for masks that are more thermally stable than pure Mo/Si multilayers

Feasibility of using Extreme Ultraviolet Explorer (EUVE) reaction wheels to satisfy Space Infrared Telescope Facility (SIRTF) maneuver requirements

NASA Technical Reports Server (NTRS)

Lightsey, W. D.

1990-01-01

A digital computer simulation is used to determine if the extreme ultraviolet explorer (EUVE) reaction wheels can provide sufficient torque and momentum storage capability to meet the space infrared telescope facility (SIRTF) maneuver requirements. A brief description of the pointing control system (PCS) and the sensor and actuator dynamic models used in the simulation is presented. A model to represent a disturbance such as fluid sloshing is developed. Results developed with the simulation, and a discussion of these results are presented.

SDO Pick of the Week

NASA Image and Video Library

2017-12-08

Magnetic arcs of solar material spewing from our favorite sphere of hot plasma, the sun. Magnetic arcs of solar material held their shapes fairly well as they spiraled above two solar active regions over 18 hours on Jan. 11-12, 2017. The charged solar material, called plasma, traces out the magnetic field lines above the active regions when viewed in wavelengths of extreme ultraviolet light, captured here by NASA’s Solar Dynamics Observatory. Extreme ultraviolet light is typically invisible to our eyes, but is colorized here in gold for easy viewing. Credit: NASA/SDO

Surface evaluation of the grazing incidence mirrors for the Extreme Ultraviolet Explorer

NASA Technical Reports Server (NTRS)

Green, James; Finley, David S.; Bowyer, Stuart; Malina, Roger F.

1987-01-01

The EUV scattering from the Wolter-Schwarzschild type I short wavelength scanner mirror aboard the Extreme Ultraviolet Explorer is measured, and the results are used to evaluate the surface microroughness of the mirror. It is found that the most likely values for the mirror surface are sigma = 20 A, and rho = 40 microns. These results are consistent with previous estimates, but with a higher degree of certainty. The full-scale simulation presented here allows over 99 percent of the light distribution to be reasonably modeled.

Enhanced attosecond pulse generation in the vacuum ultraviolet using a two-colour driving field for high harmonic generation

NASA Astrophysics Data System (ADS)

Matía-Hernando, P.; Witting, T.; Walke, D. J.; Marangos, J. P.; Tisch, J. W. G.

2018-03-01

High-harmonic radiation in the extreme ultraviolet and soft X-ray spectral regions can be used to generate attosecond pulses and to obtain structural and dynamic information in atoms and molecules. However, these sources typically suffer from a limited photon flux. An additional issue at lower photon energies is the appearance of satellites in the time domain, stemming from insufficient temporal gating and the spectral filtering required for the isolation of attosecond pulses. Such satellites limit the temporal resolution. The use of multi-colour driving fields has been proven to enhance the harmonic yield and provide additional control, using the relative delays between the different spectral components for waveform shaping. We describe here a two-colour high-harmonic source that combines a few-cycle near-infrared pulse with a multi-cycle second harmonic pulse, with both relative phase and carrier-envelope phase stabilization. We observe strong modulations in the harmonic flux, and present simulations and experimental results supporting the suppression of satellites in sub-femtosecond pulses at 20 eV compared to the single colour field case, an important requirement for attosecond pump-probe measurements.

Near unity ultraviolet absorption in graphene without patterning

NASA Astrophysics Data System (ADS)

Zhu, Jinfeng; Yan, Shuang; Feng, Naixing; Ye, Longfang; Ou, Jun-Yu; Liu, Qing Huo

2018-04-01

Enhancing the light-matter interaction of graphene is an important issue for related photonic devices and applications. In view of its potential ultraviolet applications, we aim to achieve extremely high ultraviolet absorption in graphene without any nanostructure or microstructure patterning. By manipulating the polarization and angle of incident light, the ultraviolet power can be sufficiently coupled to the optical dissipation of graphene based on single-channel coherent perfect absorption in an optimized multilayered thin film structure. The ultraviolet absorbance ratios of single and four atomic graphene layers are enhanced up to 71.4% and 92.2%, respectively. Our research provides a simple and efficient scheme to trap ultraviolet light for developing promising photonic and optoelectronic devices based on graphene and potentially other 2D materials.

Major Solar Flare

NASA Image and Video Library

2017-09-18

The Sun erupted with an X8 solar flare, one of the largest of the current solar cycle (Sept. 10, 2017). Its source was the same sunspot region that produced an X9 flare last week. This is shown in two wavelengths of extreme ultraviolet light at the same time and each reveals different features. Both are colorized to identify in which wavelength they were observed. The coils of loops after the flare are the magnetic field lines reorganizing themselves after the eruption. The video clip covers about six hours. Movies are available at https://photojournal.jpl.nasa.gov/catalog/PIA21958

Coronal Hole All Spread Out

NASA Image and Video Library

2017-11-16

This image from NASA's Solar Dynamics Observatory shows a broad coronal hole was the dominant feature this week on the sun (Nov. 7-9, 2017). It was easily recognizable as the dark expanse across the top of the sun and extending down in each side. Coronal holes are magnetically open areas on the sun that allow high-speed solar wind to gush out into space. They always appear darker in extreme ultraviolet. This one was likely the source of bright aurora that shimmered for numerous observers, with some reaching down even to Nebraska. Movies are available at https://photojournal.jpl.nasa.gov/catalog/PIA22113

Development of experimental techniques for the characterization of ultrashort photon pulses of extreme ultraviolet free-electron lasers

NASA Astrophysics Data System (ADS)

Düsterer, S.; Rehders, M.; Al-Shemmary, A.; Behrens, C.; Brenner, G.; Brovko, O.; DellAngela, M.; Drescher, M.; Faatz, B.; Feldhaus, J.; Frühling, U.; Gerasimova, N.; Gerken, N.; Gerth, C.; Golz, T.; Grebentsov, A.; Hass, E.; Honkavaara, K.; Kocharian, V.; Kurka, M.; Limberg, Th.; Mitzner, R.; Moshammer, R.; Plönjes, E.; Richter, M.; Rönsch-Schulenburg, J.; Rudenko, A.; Schlarb, H.; Schmidt, B.; Senftleben, A.; Schneidmiller, E. A.; Siemer, B.; Sorgenfrei, F.; Sorokin, A. A.; Stojanovic, N.; Tiedtke, K.; Treusch, R.; Vogt, M.; Wieland, M.; Wurth, W.; Wesch, S.; Yan, M.; Yurkov, M. V.; Zacharias, H.; Schreiber, S.

2014-12-01

One of the most challenging tasks for extreme ultraviolet, soft and hard x-ray free-electron laser photon diagnostics is the precise determination of the photon pulse duration, which is typically in the sub 100 fs range. Nine different methods, able to determine such ultrashort photon pulse durations, were compared experimentally at FLASH, the self-amplified spontaneous emission free-electron laser at DESY in Hamburg, in order to identify advantages and disadvantages of different methods. Radiation pulses at a wavelength of 13.5 and 24.0 nm together with the corresponding electron bunch duration were measured by indirect methods like analyzing spectral correlations, statistical fluctuations, and energy modulations of the electron bunch and also by direct methods like autocorrelation techniques, terahertz streaking, or reflectivity changes of solid state samples. In this paper, we present a comprehensive overview of the various techniques and a comparison of the individual experimental results. The information gained is of utmost importance for the future development of reliable pulse duration monitors indispensable for successful experiments with ultrashort extreme ultraviolet pulses.

Overview of Key Results from SDO Extreme ultraviolet Variability Experiment (EVE)

NASA Astrophysics Data System (ADS)

Woods, Tom; Eparvier, Frank; Jones, Andrew; Mason, James; Didkovsky, Leonid; Chamberlin, Phil

2016-10-01

The SDO Extreme ultraviolet Variability Experiment (EVE) includes several channels to observe the solar extreme ultraviolet (EUV) spectral irradiance from 1 to 106 nm. These channels include the Multiple EUV Grating Spectrograph (MEGS) A, B, and P channels from the University of Colorado (CU) and the EUV SpectroPhometer (ESP) channels from the University of Southern California (USC). The solar EUV spectrum is rich in many different emission lines from the corona, transition region, and chromosphere. The EVE full-disk irradiance spectra are important for studying the solar impacts in Earth's ionosphere and thermosphere and are useful for space weather operations. In addition, the EVE observations, with its high spectral resolution of 0.1 nm and in collaboration with AIA solar EUV images, have proven valuable for studying active region evolution and explosive energy release during flares and coronal eruptions. These SDO measurements have revealed interesting results such as understanding the flare variability over all wavelengths, discovering and classifying different flare phases, using coronal dimming measurements to predict CME properties of mass and velocity, and exploring the role of nano-flares in continual heating of active regions.

IEH-3 is prepared for launch on STS-95 in the MPPF

NASA Technical Reports Server (NTRS)

1998-01-01

KENNEDY SPACE CENTER, FLA. -- The International Extreme Ultraviolet Hitchhiker-3 (IEH-3), one of the payloads for the STS-95 mission, is prepared for launch in the Multi-Payload Processing Facility. IEH-3 is comprised of seven experiments, including one that will be deployed on Flight Day 3. It is the small, non-recoverable Petite Amateur Navy Satellite (PANSAT) which will store and transmit digital communications. Other IEH investigations are the Solar Constant Experiment (SOLCON), Solar Extreme Ultraviolet Hitchhiker (SEH), Spectrograph/Telescope for Astronomical Research (STAR-LITE), Ultraviolet Spectrograph Telescope for Astronomical Research (UVSTAR), Consortium for Materials Development in Space Complex Autonomous Payloads (CONCAP-IV) for growing thin films via physical vapor transport, and two Get-Away Special (GAS) canister experiments. The experiments will be mounted on a hitchhiker bridge in Discovery's payload bay.

Solar Imaging UV/EUV Spectrometers Using TVLS Gratings

NASA Technical Reports Server (NTRS)

Thomas, Roger J.

2003-01-01

It is a particular challenge to develop a stigmatic spectrograph for UV, EUV wavelengths since the very low normal-incidence reflectance of standard materials most often requires that the design be restricted to a single optical element which must simultaneously provide both reimaging and spectral dispersion. This problem has been solved in the past by the use of toroidal gratings with uniform line-spaced rulings (TULS). A number of solar extreme ultraviolet (EUV) spectrometers have been based on such designs, including SOHO/CDS, Solar-B/EIS, and the sounding rockets Solar Extreme ultraviolet Research Telescope and Spectrograph (SERTS) and Extreme Ultraviolet Normal Incidence Spectrograph (EUNIS). More recently, Kita, Harada, and collaborators have developed the theory of spherical gratings with varied line-space rulings (SVLS) operated at unity magnification, which have been flown on several astronomical satellite missions. We now combine these ideas into a spectrometer concept that puts varied-line space rulings onto toroidal gratings. Such TVLS designs are found to provide excellent imaging even at very large spectrograph magnifications and beam-speeds, permitting extremely high-quality performance in remarkably compact instrument packages. Optical characteristics of three new solar spectrometers based on this concept are described: SUMI and RAISE, two sounding rocket payloads, and NEXUS, currently being proposed as a Small-Explorer (SMEX) mission.

Dynamical structure of extreme ultraviolet macrospicules

NASA Technical Reports Server (NTRS)

Karovska, Margarita; Habbal, Shadia Rifai

1994-01-01

We describe the substructures forming the macrospicules and their temporal evolution, as revealed by the application of an image enhancement algorithm to extreme ultraviolet (EUV) observations of macrospicules. The enhanced images uncover, for the first time, the substructures forming the column-like structures within the macrospicules and the low-lying arches at their base. The spatial and temporal evolution of macrospicules clearly show continuous interaction between these substructures with occasional ejection of plasma following a ballistic trajectory. We comment on the importance of these results for planning near future space observations of macrospicules with better temporal and spatial resolution.

Development of a Wafer Positioning System for the Sandia Extreme Ultraviolet Lithography Tool

NASA Technical Reports Server (NTRS)

Wronosky, John B.; Smith, Tony G.; Darnold, Joel R.

1996-01-01

A wafer positioning system was recently developed by Sandia National Laboratories for an Extreme Ultraviolet Lithography (EUVL) tool. The system, which utilizes a magnetically levitated fine stage to provide ultra-precise positioning in all six degrees of freedom, incorporates technological improvements resulting from four years of prototype development. This paper describes the design, implementation, and functional capability of the system. Specifics regarding control system electronics, including software and control algorithm structure, as well as performance design goals and test results are presented. Potential system enhancements, some of which are in process, are also discussed.

Reflective optical imaging system with balanced distortion

DOEpatents

Chapman, Henry N.; Hudyma, Russell M.; Shafer, David R.; Sweeney, Donald W.

1999-01-01

An optical system compatible with short wavelength (extreme ultraviolet) An optical system compatible with short wavelength (extreme ultraviolet) radiation comprising four reflective elements for projecting a mask image onto a substrate. The four optical elements comprise, in order from object to image, convex, concave, convex and concave mirrors. The optical system is particularly suited for step and scan lithography methods. The invention enables the use of larger slit dimensions associated with ring field scanning optics, improves wafer throughput and allows higher semiconductor device density. The inventive optical system is characterized by reduced dynamic distortion because the static distortion is balanced across the slit width.

SiC: filter for extreme ultraviolet

NASA Astrophysics Data System (ADS)

Mitrofanov, Alexander V.; Pudonin, Fedor A.; Zhitnik, Igor A.

1994-09-01

It is proposed to use thin films of silicon carbide as Extreme Ultraviolet bandpass filters transparent within 135-304 A band and with excellent cutoff blocking of the strong L(subscript (alpha) ) 1216 A line radiation. Mesh or particle track porous membrane supporting 200-800 A thickness SiC filters have been made by RF sputtering techniques. We describe the design and performance of these filters. Such type SiC filter was used in front of the microchannel plate detector of the TEREK X-Ray Telescope mounted on the Solar Observatory CORONAS-I which was successfully launched on March 2, 1994.

Extreme ultraviolet photoionization of aldoses and ketoses

NASA Astrophysics Data System (ADS)

Shin, Joong-Won; Dong, Feng; Grisham, Michael E.; Rocca, Jorge J.; Bernstein, Elliot R.

2011-04-01

Gas phase monosaccharides (2-deoxyribose, ribose, arabinose, xylose, lyxose, glucose galactose, fructose, and tagatose), generated by laser desorption of solid sample pellets, are ionized with extreme ultraviolet photons (EUV, 46.9 nm, 26.44 eV). The resulting fragment ions are analyzed using a time of flight mass spectrometer. All aldoses yield identical fragment ions regardless of size, and ketoses, while also generating same ions as aldoses, yields additional features. Extensive fragmentation of the monosaccharides is the result the EUV photons ionizing various inner valence orbitals. The observed fragmentation patterns are not dependent upon hydrogen bonding structure or OH group orientation.

Extreme ultraviolet emission spectra of Gd and Tb ions

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kilbane, D.; O'Sullivan, G.

2010-11-15

Theoretical extreme ultraviolet emission spectra of gadolinium and terbium ions calculated with the Cowan suite of codes and the flexible atomic code (FAC) relativistic code are presented. 4d-4f and 4p-4d transitions give rise to unresolved transition arrays in a range of ions. The effects of configuration interaction are investigated for transitions between singly excited configurations. Optimization of emission at 6.775 nm and 6.515 nm is achieved for Gd and Tb ions, respectively, by consideration of plasma effects. The resulting synthetic spectra are compared with experimental spectra recorded using the laser produced plasma technique.

Compact multi-bounce projection system for extreme ultraviolet projection lithography

DOEpatents

Hudyma, Russell M.

2002-01-01

An optical system compatible with short wavelength (extreme ultraviolet) radiation comprising four optical elements providing five reflective surfaces for projecting a mask image onto a substrate. The five optical surfaces are characterized in order from object to image as concave, convex, concave, convex and concave mirrors. The second and fourth reflective surfaces are part of the same optical element. The optical system is particularly suited for ring field step and scan lithography methods. The invention uses aspheric mirrors to minimize static distortion and balance the static distortion across the ring field width, which effectively minimizes dynamic distortion.

Driving the Heliospheric Jellyfish

NASA Astrophysics Data System (ADS)

Leamon, R. J.; Mcintosh, S. W.

2016-12-01

Recent observational work has demonstrated that the enigmatic sunspotcycle and global magnetic environment of the Sun which source theeruptive events and modulate the solar wind, respectively, can beexplained in terms of the intra- and extra-hemispheric interaction ofmagnetic activity bands that belong to the 22-year magnetic polaritycycle. Those activity bands appear to be anchored deep in the Sun'sconvective interior and governed by the rotation of our star's radiativezone. We have also observed that those magnetic bands exhibit strongquasi-annual variability in the rotating convecting system which resultsin a significant local modulation of solar surface magnetism, forcingthe production of large eruptive events in each hemisphere that mouldsthe global-scale solar magnetic field and the solar-wind-inflatedheliosphere. Together with significant changes in the Sun's ultraviolet(UV), extreme ultraviolet (EUV), and X-Ray irradiance, these eruptivefluctuations ensnare all the Heliosphere (all of Heliophysics) like thetentacles of a jellyfish, and can be inferred in variations of suchwide-ranging phenomena as the South Atlantic Anomaly, the thermosphere,the radiation belts, and the can address ``Has Voyager left theHeliosphere?''

Critical illumination condenser for x-ray lithography

DOEpatents

Cohen, S.J.; Seppala, L.G.

1998-04-07

A critical illumination condenser system is disclosed, particularly adapted for use in extreme ultraviolet (EUV) projection lithography based on a ring field imaging system and a laser produced plasma source. The system uses three spherical mirrors and is capable of illuminating the extent of the mask plane by scanning either the primary mirror or the laser plasma source. The angles of radiation incident upon each mirror of the critical illumination condenser vary by less than eight (8) degrees. For example, the imaging system in which the critical illumination condenser is utilized has a 200 {micro}m source and requires a magnification of 26. The three spherical mirror system constitutes a two mirror inverse Cassegrain, or Schwarzschild configuration, with a 25% area obstruction (50% linear obstruction). The third mirror provides the final pupil and image relay. The mirrors include a multilayer reflective coating which is reflective over a narrow bandwidth. 6 figs.

Critical illumination condenser for x-ray lithography

DOEpatents

Cohen, Simon J.; Seppala, Lynn G.

1998-01-01

A critical illumination condenser system, particularly adapted for use in extreme ultraviolet (EUV) projection lithography based on a ring field imaging system and a laser produced plasma source. The system uses three spherical mirrors and is capable of illuminating the extent of the mask plane by scanning either the primary mirror or the laser plasma source. The angles of radiation incident upon each mirror of the critical illumination condenser vary by less than eight (8) degrees. For example, the imaging system in which the critical illumination condenser is utilized has a 200 .mu.m source and requires a magnification of 26.times.. The three spherical mirror system constitutes a two mirror inverse Cassegrain, or Schwarzschild configuration, with a 25% area obstruction (50% linear obstruction). The third mirror provides the final pupil and image relay. The mirrors include a multilayer reflective coating which is reflective over a narrow bandwidth.

From the Sun with Love

NASA Image and Video Library

2017-12-08

This Solar Dynamics Observatory (SDO) image of the Sun taken on January 20, 2012 in extreme ultraviolet light captures a heart-shaped dark coronal hole. Coronal holes are areas of the Sun's surface that are the source of open magnetic field lines that head way out into space. They are also the source regions of the fast solar wind, which is characterized by a relatively steady speed of approximately 800 km/s (about 1.8 million mph). NASA image use policy. NASA Goddard Space Flight Center enables NASA’s mission through four scientific endeavors: Earth Science, Heliophysics, Solar System Exploration, and Astrophysics. Goddard plays a leading role in NASA’s accomplishments by contributing compelling scientific knowledge to advance the Agency’s mission. Follow us on Twitter Like us on Facebook Find us on Instagram

Dual-domain lateral shearing interferometer

DOEpatents

Naulleau, Patrick P.; Goldberg, Kenneth Alan

2004-03-16

The phase-shifting point diffraction interferometer (PS/PDI) was developed to address the problem of at-wavelength metrology of extreme ultraviolet (EUV) optical systems. Although extremely accurate, the fact that the PS/PDI is limited to use with coherent EUV sources, such as undulator radiation, is a drawback for its widespread use. An alternative to the PS/PDI, with relaxed coherence requirements, is lateral shearing interferometry (LSI). The use of a cross-grating, carrier-frequency configuration to characterize a large-field 4.times.-reduction EUV lithography optic is demonstrated. The results obtained are directly compared with PS/PDI measurements. A defocused implementation of the lateral shearing interferometer in which an image-plane filter allows both phase-shifting and Fourier wavefront recovery. The two wavefront recovery methods can be combined in a dual-domain technique providing suppression of noise added by self-interference of high-frequency components in the test-optic wavefront.

Beyond Extreme Ultra Violet (BEUV) Radiation from Spherically symmetrical High-Z plasmas

NASA Astrophysics Data System (ADS)

Yoshida, Kensuke; Fujioka, Shinsuke; Higashiguchi, Takeshi; Ugomori, Teruyuki; Tanaka, Nozomi; Kawasaki, Masato; Suzuki, Yuhei; Suzuki, Chihiro; Tomita, Kentaro; Hirose, Ryouichi; Eshima, Takeo; Ohashi, Hayato; Nishikino, Masaharu; Scally, Enda; Nshimura, Hiroaki; Azechi, Hiroshi; O'Sullivan, Gerard

2016-03-01

Photo-lithography is a key technology for volume manufacture of high performance and compact semiconductor devices. Smaller and more complex structures can be fabricated by using shorter wavelength light in the photolithography. One of the most critical issues in development of the next generation photo-lithography is to increase energy conversion efficiency (CE) from laser to shorter wavelength light. Experimental database of beyond extreme ultraviolet (BEUV) radiation was obtained by using spherically symmetrical high-Z plasmas generated with spherically allocated laser beams. Absolute energy and spectra of BEUV light emitted from Tb, Gd, and Mo plasmas were measured with a absolutely calibrated BEUV calorimeter and a transmission grating spectrometer. 1.0 x 1012 W/cm2 is the optimal laser intensity to produced efficient BEUV light source plasmas with Tb and Gd targets. Maximum CE is achieved at 0.8% that is two times higher than the published CEs obtained with planar targets.

Automated Identification of Coronal Holes from Synoptic EUV Maps

NASA Astrophysics Data System (ADS)

Hamada, Amr; Asikainen, Timo; Virtanen, Ilpo; Mursula, Kalevi

2018-04-01

Coronal holes (CHs) are regions of open magnetic field lines in the solar corona and the source of the fast solar wind. Understanding the evolution of coronal holes is critical for solar magnetism as well as for accurate space weather forecasts. We study the extreme ultraviolet (EUV) synoptic maps at three wavelengths (195 Å/193 Å, 171 Å and 304 Å) measured by the Solar and Heliospheric Observatory/Extreme Ultraviolet Imaging Telescope (SOHO/EIT) and the Solar Dynamics Observatory/Atmospheric Imaging Assembly (SDO/AIA) instruments. The two datasets are first homogenized by scaling the SDO/AIA data to the SOHO/EIT level by means of histogram equalization. We then develop a novel automated method to identify CHs from these homogenized maps by determining the intensity threshold of CH regions separately for each synoptic map. This is done by identifying the best location and size of an image segment, which optimally contains portions of coronal holes and the surrounding quiet Sun allowing us to detect the momentary intensity threshold. Our method is thus able to adjust itself to the changing scale size of coronal holes and to temporally varying intensities. To make full use of the information in the three wavelengths we construct a composite CH distribution, which is more robust than distributions based on one wavelength. Using the composite CH dataset we discuss the temporal evolution of CHs during the Solar Cycles 23 and 24.

Determination of Differential Emission Measure from Solar Extreme Ultraviolet Images

NASA Astrophysics Data System (ADS)

Su, Yang; Veronig, Astrid M.; Hannah, Iain G.; Cheung, Mark C. M.; Dennis, Brian R.; Holman, Gordon D.; Gan, Weiqun; Li, Youping

2018-03-01

The Atmospheric Imaging Assembly (AIA) on board the Solar Dynamic Observatory (SDO) has been providing high-cadence, high-resolution, full-disk UV-visible/extreme ultraviolet (EUV) images since 2010, with the best time coverage among all the solar missions. A number of codes have been developed to extract plasma differential emission measures (DEMs) from AIA images. Although widely used, they cannot effectively constrain the DEM at flaring temperatures with AIA data alone. This often results in much higher X-ray fluxes than observed. One way to solve the problem is by adding more constraint from other data sets (such as soft X-ray images and fluxes). However, the spatial information of plasma DEMs are lost in many cases. In this Letter, we present a different approach to constrain the DEMs. We tested the sparse inversion code and show that the default settings reproduce X-ray fluxes that could be too high. Based on the tests with both simulated and observed AIA data, we provided recommended settings of basis functions and tolerances. The new DEM solutions derived from AIA images alone are much more consistent with (thermal) X-ray observations, and provide valuable information by mapping the thermal plasma from ∼0.3 to ∼30 MK. Such improvement is a key step in understanding the nature of individual X-ray sources, and particularly important for studies of flare initiation.

Surface phenomena related to mirror degradation in extreme ultraviolet (EUV) lithography

NASA Astrophysics Data System (ADS)

Madey, Theodore E.; Faradzhev, Nadir S.; Yakshinskiy, Boris V.; Edwards, N. V.

2006-12-01

One of the most promising methods for next generation device manufacturing is extreme ultraviolet (EUV) lithography, which uses 13.5 nm wavelength radiation generated from freestanding plasma-based sources. The short wavelength of the incident illumination allows for a considerable decrease in printed feature size, but also creates a range of technological challenges not present for traditional optical lithography. Contamination and oxidation form on multilayer reflecting optics surfaces that not only reduce system throughput because of the associated reduction in EUV reflectivity, but also introduce wavefront aberrations that compromise the ability to print uniform features. Capping layers of ruthenium, films ∼2 nm thick, are found to extend the lifetime of Mo/Si multilayer mirrors used in EUV lithography applications. However, reflectivities of even the Ru-coated mirrors degrade in time during exposure to EUV radiation. Ruthenium surfaces are chemically reactive and are very effective as heterogeneous catalysts. In the present paper we summarize the thermal and radiation-induced surface chemistry of bare Ru exposed to gases; the emphasis is on H2O vapor, a dominant background gas in vacuum processing chambers. Our goal is to provide insights into the fundamental physical processes that affect the reflectivity of Ru-coated Mo/Si multilayer mirrors exposed to EUV radiation. Our ultimate goal is to identify and recommend practices or antidotes that may extend mirror lifetimes.

Kr photoionized plasma induced by intense extreme ultraviolet pulses

DOE Office of Scientific and Technical Information (OSTI.GOV)

Bartnik, A., E-mail: andrzej.bartnik@wat.edu.pl; Wachulak, P.; Fiedorowicz, H.

Irradiation of any gas with an intense EUV (extreme ultraviolet) radiation beam can result in creation of photoionized plasmas. The parameters of such plasmas can be significantly different when compared with those of the laser produced plasmas (LPP) or discharge plasmas. In this work, the photoionized plasmas were created in a krypton gas irradiated using an LPP EUV source operating at a 10 Hz repetition rate. The Kr gas was injected into the vacuum chamber synchronously with the EUV radiation pulses. The EUV beam was focused onto a Kr gas stream using an axisymmetrical ellipsoidal collector. The resulting low temperature Krmore » plasmas emitted electromagnetic radiation in the wide spectral range. The emission spectra were measured either in the EUV or an optical range. The EUV spectrum was dominated by emission lines originating from Kr III and Kr IV ions, and the UV/VIS spectra were composed from Kr II and Kr I lines. The spectral lines recorded in EUV, UV, and VIS ranges were used for the construction of Boltzmann plots to be used for the estimation of the electron temperature. It was shown that for the lowest Kr III and Kr IV levels, the local thermodynamic equilibrium (LTE) conditions were not fulfilled. The electron temperature was thus estimated based on Kr II and Kr I species where the partial LTE conditions could be expected.« less

Emulation of anamorphic imaging on the SHARP extreme ultraviolet mask microscope

DOE PAGES

Benk, Markus P.; Wojdyla, Antoine; Chao, Weilun; ...

2016-07-12

The SHARP high-numerical aperture actinic reticle review project is a synchrotron-based, extreme ultraviolet (EUV) microscope dedicated to photomask research. SHARP emulates the illumination and imaging conditions of current EUV lithography scanners and those several generations into the future. An anamorphic imaging optic with increased mask-side numerical aperture (NA) in the horizontal and increased demagnification in the vertical direction has been proposed in this paper to overcome limitations of current multilayer coatings and extend EUV lithography beyond 0.33 NA. Zoneplate lenses with an anamorphic 4×/8× NA of 0.55 are fabricated and installed in the SHARP microscope to emulate anamorphic imaging. SHARP’smore » Fourier synthesis illuminator with a range of angles exceeding the collected solid angle of the newly designed elliptical zoneplates can produce arbitrary angular source spectra matched to anamorphic imaging. A target with anamorphic dense features down to 50-nm critical dimension is fabricated using 40 nm of nickel as the absorber. In a demonstration experiment, anamorphic imaging at 0.55 4×/8× NA and 6 deg central ray angle (CRA) is compared with conventional imaging at 0.5 4× NA and 8 deg CRA. A significant contrast loss in horizontal features is observed in the conventional images. Finally, the anamorphic images show the same image quality in the horizontal and vertical directions.« less

Emulation of anamorphic imaging on the SHARP extreme ultraviolet mask microscope

DOE Office of Scientific and Technical Information (OSTI.GOV)

Benk, Markus P.; Wojdyla, Antoine; Chao, Weilun

The SHARP high-numerical aperture actinic reticle review project is a synchrotron-based, extreme ultraviolet (EUV) microscope dedicated to photomask research. SHARP emulates the illumination and imaging conditions of current EUV lithography scanners and those several generations into the future. An anamorphic imaging optic with increased mask-side numerical aperture (NA) in the horizontal and increased demagnification in the vertical direction has been proposed in this paper to overcome limitations of current multilayer coatings and extend EUV lithography beyond 0.33 NA. Zoneplate lenses with an anamorphic 4×/8× NA of 0.55 are fabricated and installed in the SHARP microscope to emulate anamorphic imaging. SHARP’smore » Fourier synthesis illuminator with a range of angles exceeding the collected solid angle of the newly designed elliptical zoneplates can produce arbitrary angular source spectra matched to anamorphic imaging. A target with anamorphic dense features down to 50-nm critical dimension is fabricated using 40 nm of nickel as the absorber. In a demonstration experiment, anamorphic imaging at 0.55 4×/8× NA and 6 deg central ray angle (CRA) is compared with conventional imaging at 0.5 4× NA and 8 deg CRA. A significant contrast loss in horizontal features is observed in the conventional images. Finally, the anamorphic images show the same image quality in the horizontal and vertical directions.« less

Kr photoionized plasma induced by intense extreme ultraviolet pulses

NASA Astrophysics Data System (ADS)

Bartnik, A.; Wachulak, P.; Fiedorowicz, H.; Skrzeczanowski, W.

2016-04-01

Irradiation of any gas with an intense EUV (extreme ultraviolet) radiation beam can result in creation of photoionized plasmas. The parameters of such plasmas can be significantly different when compared with those of the laser produced plasmas (LPP) or discharge plasmas. In this work, the photoionized plasmas were created in a krypton gas irradiated using an LPP EUV source operating at a 10 Hz repetition rate. The Kr gas was injected into the vacuum chamber synchronously with the EUV radiation pulses. The EUV beam was focused onto a Kr gas stream using an axisymmetrical ellipsoidal collector. The resulting low temperature Kr plasmas emitted electromagnetic radiation in the wide spectral range. The emission spectra were measured either in the EUV or an optical range. The EUV spectrum was dominated by emission lines originating from Kr III and Kr IV ions, and the UV/VIS spectra were composed from Kr II and Kr I lines. The spectral lines recorded in EUV, UV, and VIS ranges were used for the construction of Boltzmann plots to be used for the estimation of the electron temperature. It was shown that for the lowest Kr III and Kr IV levels, the local thermodynamic equilibrium (LTE) conditions were not fulfilled. The electron temperature was thus estimated based on Kr II and Kr I species where the partial LTE conditions could be expected.

Inflight Performance of the SDO Fine Pointing Science Mode

NASA Technical Reports Server (NTRS)

Mason, Paul; O'Donnell, James; Starin, Scott R.; Halverson, Julie; Vess, Melissa F.

2017-01-01

The Solar Dynamics Observatory (SDO) was successfully launched and deployed from its Atlas V launch vehicle on February 11, 2010. Three months later, on May 14, 2010, the fully commissioned heliophysics laboratory was handed over to Space Systems Mission Operations to begin its science mission. SDO is an Explorer-class mission now operating in a geosynchronous orbit, sending data 24 hours per day to a dedicated ground station in White Sands, New Mexico. It carries a suite of instruments designed to observe the Sun in multiple wavelengths at unprecedented resolution. The Atmospheric Imaging Assembly (AIA) includes four telescopes with 4096x4096 focal plane CCDs that can image the full solar disk in seven extreme ultraviolet and three ultraviolet-visible wavelengths. The Extreme Ultraviolet Variability Experiment (EVE) collects time-correlated data on the activity of the Sun's corona. The Helioseismic and Magnetic Imager (HMI) enables study of pressure waves moving through the body of the Sun.

ZnO quantum dot-doped graphene/h-BN/GaN-heterostructure ultraviolet photodetector with extremely high responsivity

NASA Astrophysics Data System (ADS)

Lu, Yanghua; Wu, Zhiqian; Xu, Wenli; Lin, Shisheng

2016-12-01

A ZnO quantum dot photo-doped graphene/h-BN/GaN-heterostructure ultraviolet photodetector with extremely high responsivity of more than 1915 A W-1 and detectivity of more than 1.02 × 1013 Jones (Jones = cm Hz1/2 W-1) has been demonstrated. The interfaced h-BN layer increases the barrier height at the graphene/GaN heterojunction, which decreases the dark current and improves the on/off current ratio of the device. The photo-doping effect increases the barrier height and carrier concentration at the graphene/h-BN/GaN heterojunction, thus the responsivity is improved from 1473 A W-1 to 1915 A W-1 and the detectivity is improved from 5.8 × 1012 to 1.0 × 1013 Jones. Moreover, all of the responsivity and detectivity values are the highest values among all the graphene-based ultraviolet photodetectors.

Pluto's Ultraviolet Airglow and Detection of Ions in the Upper Atmosphere

NASA Astrophysics Data System (ADS)

Steffl, A.; Young, L. A.; Kammer, J.; Gladstone, R.; Hinson, D. P.; Summers, M. E.; Strobel, D. F.; Stern, S. A.; Weaver, H. A., Jr.; Olkin, C.; Ennico Smith, K.

2017-12-01

In July 2015, the Alice ultraviolet spectrograph aboard the New Horizons spacecraft made numerous observations of Pluto and its atmosphere. We present here the far ultraviolet reflectance spectrum of Pluto and airglow emissions from its atmosphere. At wavelengths greater than 1400Å, Pluto's spectrum is dominated by sunlight reflected from the surface of the planet. Various hydrocarbon species such as C2H4 are detected in absorption of the solar continuum. Below 1400Å, Pluto's atmosphere is opaque and the surface cannot be detected. However, after carefully removing various sources of background light, we see extremely faint airglow emissions (<0.05 Rayleighs/Ångstrom) from Pluto's atmosphere. All of the emissions are produced by nitrogen in various forms: molecular, atomic, and singly ionized. The detection of N+ at 1086Å is the first, and thus far only, direct detection of ions in Pluto's atmosphere. This N+ emission line is produced primarily by dissociative photoionization of molecular N2 by solar EUV photons (energy > 34.7 eV; wavelength < 360Å). Notably absent from Pluto's spectrum are emission lines from argon at 1048 and 1067Å. We place upper limits on the amount of argon in Pluto's atmosphere above the tau=1 level (observed to be at 750km tangent altitude) that are significantly lower than pre-encounter atmospheric models.

Ultraviolet radiation induced discharge laser

DOEpatents

Gilson, Verle A.; Schriever, Richard L.; Shearer, James W.

1978-01-01

An ultraviolet radiation source associated with a suitable cathode-anode electrode structure, disposed in a gas-filled cavity of a high pressure pulsed laser, such as a transverse electric atmosphere (TEA) laser, to achieve free electron production in the gas by photoelectric interaction between ultraviolet radiation and the cathode prior to the gas-exciting cathode-to-anode electrical discharge, thereby providing volume ionization of the gas. The ultraviolet radiation is produced by a light source or by a spark discharge.

Microwave-driven ultraviolet light sources

DOEpatents

Manos, Dennis M.; Diggs, Jessie; Ametepe, Joseph D.

2002-01-29

A microwave-driven ultraviolet (UV) light source is provided. The light source comprises an over-moded microwave cavity having at least one discharge bulb disposed within the microwave cavity. At least one magnetron probe is coupled directly to the microwave cavity.

Free electron lasers for 13nm EUV lithography: RF design strategies to minimise investment and operational costs

NASA Astrophysics Data System (ADS)

Keens, Simon; Rossa, Bernhard; Frei, Marcel

2016-03-01

As the semiconductor industry proceeds to develop ever better sources of extreme ultraviolet (EUV) light for photolithography applications, two distinct technologies have come to prominence: Tin-plasma and free electron laser (FEL) sources. Tin plasma sources have been in development within the industry for many years, and have been widely reported. Meanwhile, FELs represent the most promising alternative to create high power EUV frequencies and, while tin-plasma source development has been ongoing, such lasers have been continuously developed by academic institutions for use in fundamental research programmes in conjunction with universities and national scientific institutions. This paper follows developments in the field of academic FELs, and presents information regarding novel technologies, specifically in the area of RF design strategy, that may be incorporated into future industrial FEL systems for EUV lithography in order to minimize the necessary investment and operational costs. It goes on to try to assess the cost-benefit of an alternate RF design strategy, based upon previous studies.

21 CFR 872.6350 - Ultraviolet detector.

Code of Federal Regulations, 2010 CFR

2010-04-01

... 21 Food and Drugs 8 2010-04-01 2010-04-01 false Ultraviolet detector. 872.6350 Section 872.6350...) MEDICAL DEVICES DENTAL DEVICES Miscellaneous Devices § 872.6350 Ultraviolet detector. (a) Identification. An ultraviolet detector is a device intended to provide a source of ultraviolet light which is used...

21 CFR 872.6350 - Ultraviolet detector.

Code of Federal Regulations, 2014 CFR

2014-04-01

... 21 Food and Drugs 8 2014-04-01 2014-04-01 false Ultraviolet detector. 872.6350 Section 872.6350...) MEDICAL DEVICES DENTAL DEVICES Miscellaneous Devices § 872.6350 Ultraviolet detector. (a) Identification. An ultraviolet detector is a device intended to provide a source of ultraviolet light which is used...

21 CFR 872.6350 - Ultraviolet detector.

Code of Federal Regulations, 2011 CFR

2011-04-01

... 21 Food and Drugs 8 2011-04-01 2011-04-01 false Ultraviolet detector. 872.6350 Section 872.6350...) MEDICAL DEVICES DENTAL DEVICES Miscellaneous Devices § 872.6350 Ultraviolet detector. (a) Identification. An ultraviolet detector is a device intended to provide a source of ultraviolet light which is used...

21 CFR 872.6350 - Ultraviolet detector.

Code of Federal Regulations, 2012 CFR

2012-04-01

... 21 Food and Drugs 8 2012-04-01 2012-04-01 false Ultraviolet detector. 872.6350 Section 872.6350...) MEDICAL DEVICES DENTAL DEVICES Miscellaneous Devices § 872.6350 Ultraviolet detector. (a) Identification. An ultraviolet detector is a device intended to provide a source of ultraviolet light which is used...

21 CFR 872.6350 - Ultraviolet detector.

Code of Federal Regulations, 2013 CFR

2013-04-01

... 21 Food and Drugs 8 2013-04-01 2013-04-01 false Ultraviolet detector. 872.6350 Section 872.6350...) MEDICAL DEVICES DENTAL DEVICES Miscellaneous Devices § 872.6350 Ultraviolet detector. (a) Identification. An ultraviolet detector is a device intended to provide a source of ultraviolet light which is used...

The Sun Forms a Question

NASA Image and Video Library

2017-12-29

Oddly enough, an elongated coronal hole (the darker area near the center) seems to shape itself into a single, recognizable question mark over the period of one day (Dec. 21-22, 2017). Coronal holes are areas of open magnetic field that appear darker in extreme ultraviolet light, as is seen here. These holes are the source of streaming plasma that we call solar wind. While this exercise is akin to seeing shapes in clouds, it is fun to consider what the sun might be asking? Perhaps what the new year will bring? Guess what I am going to do next? Movies are available at https://photojournal.jpl.nasa.gov/catalog/PIA22197

Extreme ultraviolet spectroscopy of G191-B2B - Direct observation of ionization edges

NASA Technical Reports Server (NTRS)

Wilkinson, Erik; Green, James C.; Cash, Webster

1992-01-01

We present the first spectrum of the hot, DA white dwarf G191-B2B (wd 0501 + 527) between 200 and 330 A. The spectrum, which has about 2 A resolution, was obtained with a sounding rocket-borne, grazing incidence spectrograph. The spectrum shows no evidence of He II, the expected primary opacity source in this wavelength region. Three ionization edges and one absorption feature were observed and are suggestive of O III existing in the photosphere of G191-B2B. Also noted is a broad spectral depression that may result from Fe VI in the photosphere.

Apollo-Soyuz pamphlet no. 3: Sun, stars, in between. [experimental design

NASA Technical Reports Server (NTRS)

Page, L. W.; From, T. P.

1977-01-01

The structure of the sun and its surface temperature and brightness are discussed as background for explaining the ASTP joint experiment to photograph the solar corona from Soyuz while the Apollo spacecraft created an artificial eclipse by blocking out the sun. Stellar spectra, stellar evolution, and the Milky Way galaxy are explored in relation to the MA-083 experiment to survey the sky for extreme ultraviolet sources and background radiation. Interstellar gas and the spectrum of helium are discussed in relation to the MA-088 experiment designed to detect interstellar helium entering the solar system and to measure its density and motion.

Inner Magnetospheric Electric Fields Derived from IMAGE EUV

NASA Technical Reports Server (NTRS)

Gallagher, D. L.; Adrian, M. L.

2007-01-01

The local and global patterns of plasmaspheric plasma transport reflect the influence of electric fields imposed by all sources in the inner magnetosphere. Image sequences of thermal plasma G:istribution obtained from the IMAGE Mission Extreme Ultraviolet Imager can be used to derive plasma motions and, using a magnetic field model, the corresponding electric fields. These motions and fields directly reflect the dynamic coupling of injected plasmasheet plasma and the ionosphere, in addition to solar wind and atmospheric drivers. What is being learned about the morphology of inner magnetospheric electric fields during storm and quite conditions from this new empirical tool will be presented and discussed.

Images in the rocket ultraviolet - The stellar population in the central bulge of M31

NASA Technical Reports Server (NTRS)

Bohlin, R. C.; Cornett, R. H.; Hill, J. K.; Hill, R. S.; Oconnell, R. W.; Stecher, T. P.

1985-01-01

Imagery of the bulge of M31 obtained with a rocket-borne telescope in two broad bands centered at 1460 A and 2380 A is discussed. The UV spatial profiles over a region about 200 arcsec wide are identical with those at visible wavelengths. The absence of detectable point sources indicates that main-sequence stars hotter than B0 V are not present in the bulge. It is suggested that the far-UV flux in old stellar populations originates in post-AGB stars. The UV flux from such stars is extremely sensitive to age and the physics of their previous mass loss.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wu Shioumin; Kruijs, Robbert van de; Zoethout, Erwin

Ion sputtering yields for Ru, Mo, and Si under Ar{sup +} ion bombardment in the near-threshold energy range have been studied using an in situ weight-loss method with a Kaufman ion source, Faraday cup, and quartz crystal microbalance. The results are compared to theoretical models. The accuracy of the in situ weight-loss method was verified by thickness-decrease measurements using grazing incidence x-ray reflectometry, and results from both methods are in good agreement. These results provide accurate data sets for theoretical modeling in the near-threshold sputter regime and are of relevance for (optical) surfaces exposed to plasmas, as, for instance, inmore » extreme ultraviolet photolithography.« less

Maskless, reticle-free, lithography

DOEpatents

Ceglio, N.M.; Markle, D.A.

1997-11-25

A lithography system in which the mask or reticle, which usually carries the pattern to be printed onto a substrate, is replaced by a programmable array of binary (i.e. on/off) light valves or switches which can be programmed to replicate a portion of the pattern each time an illuminating light source is flashed. The pattern of light produced by the programmable array is imaged onto a lithographic substrate which is mounted on a scanning stage as is common in optical lithography. The stage motion and the pattern of light displayed by the programmable array are precisely synchronized with the flashing illumination system so that each flash accurately positions the image of the pattern on the substrate. This is achieved by advancing the pattern held in the programmable array by an amount which corresponds to the travel of the substrate stage each time the light source flashes. In this manner the image is built up of multiple flashes and an isolated defect in the array will only have a small effect on the printed pattern. The method includes projection lithographies using radiation other than optical or ultraviolet light. The programmable array of binary switches would be used to control extreme ultraviolet (EUV), x-ray, or electron, illumination systems, obviating the need for stable, defect free masks for projection EUV, x-ray, or electron, lithographies. 7 figs.

Maskless, reticle-free, lithography

DOEpatents

Ceglio, Natale M.; Markle, David A.

1997-11-25

A lithography system in which the mask or reticle, which usually carries the pattern to be printed onto a substrate, is replaced by a programmable array of binary (i.e. on/off) light valves or switches which can be programmed to replicate a portion of the pattern each time an illuminating light source is flashed. The pattern of light produced by the programmable array is imaged onto a lithographic substrate which is mounted on a scanning stage as is common in optical lithography. The stage motion and the pattern of light displayed by the programmable array are precisely synchronized with the flashing illumination system so that each flash accurately positions the image of the pattern on the substrate. This is achieved by advancing the pattern held in the programmable array by an amount which corresponds to the travel of the substrate stage each time the light source flashes. In this manner the image is built up of multiple flashes and an isolated defect in the array will only have a small effect on the printed pattern. The method includes projection lithographies using radiation other than optical or ultraviolet light. The programmable array of binary switches would be used to control extreme ultraviolet (EUV), x-ray, or electron, illumination systems, obviating the need for stable, defect free masks for projection EUV, x-ray, or electron, lithographies.

Attosecond light sources in the water window

NASA Astrophysics Data System (ADS)

Ren, Xiaoming; Li, Jie; Yin, Yanchun; Zhao, Kun; Chew, Andrew; Wang, Yang; Hu, Shuyuan; Cheng, Yan; Cunningham, Eric; Wu, Yi; Chini, Michael; Chang, Zenghu

2018-02-01

As a compact and burgeoning alternative to synchrotron radiation and free-electron lasers, high harmonic generation (HHG) has proven its superiority in static and time-resolved extreme ultraviolet spectroscopy for the past two decades and has recently gained many interests and successes in generating soft x-ray emissions covering the biologically important water window spectral region. Unlike synchrotron and free-electron sources, which suffer from relatively long pulse width or large time jitter, soft x-ray sources from HHG could offer attosecond time resolution and be synchronized with their driving field to investigate time-resolved near edge absorption spectroscopy, which could reveal rich structural and dynamical information of the interrogated samples. In this paper, we review recent progresses on generating and characterizing attosecond light sources in the water window region. We show our development of an energetic, two-cycle, carrier-envelope phase stable laser source at 1.7 μm and our achievement in producing a 53 as soft x-ray pulse covering the carbon K-edge in the water window. Such source paves the ways for the next generation x-ray spectroscopy with unprecedented temporal resolution.

Improving Ramsey spectroscopy in the extreme-ultraviolet region with a random-sampling approach

DOE Office of Scientific and Technical Information (OSTI.GOV)

Eramo, R.; Bellini, M.; European Laboratory for Non-linear Spectroscopy

2011-04-15

Ramsey-like techniques, based on the coherent excitation of a sample by delayed and phase-correlated pulses, are promising tools for high-precision spectroscopic tests of QED in the extreme-ultraviolet (xuv) spectral region, but currently suffer experimental limitations related to long acquisition times and critical stability issues. Here we propose a random subsampling approach to Ramsey spectroscopy that, by allowing experimentalists to reach a given spectral resolution goal in a fraction of the usual acquisition time, leads to substantial improvements in high-resolution spectroscopy and may open the way to a widespread application of Ramsey-like techniques to precision measurements in the xuv spectral region.

Electron heated target temperature measurements in petawatt laser experiments based on extreme ultraviolet imaging and spectroscopy.

PubMed

Ma, T; Beg, F N; MacPhee, A G; Chung, H-K; Key, M H; Mackinnon, A J; Patel, P K; Hatchett, S; Akli, K U; Stephens, R B; Chen, C D; Freeman, R R; Link, A; Offermann, D T; Ovchinnikov, V; Van Woerkom, L D

2008-10-01

Three independent methods (extreme ultraviolet spectroscopy, imaging at 68 and 256 eV) have been used to measure planar target rear surface plasma temperature due to heating by hot electrons. The hot electrons are produced by ultraintense laser-plasma interactions using the 150 J, 0.5 ps Titan laser. Soft x-ray spectroscopy in the 50-400 eV region and imaging at the 68 and 256 eV photon energies give a planar deuterated carbon target rear surface pre-expansion temperature in the 125-150 eV range, with the rear plasma plume averaging a temperature approximately 74 eV.

The extreme ultraviolet spectrograph: A radial groove grating, sounding rocket-borne, astronomical instrument

NASA Technical Reports Server (NTRS)

Wilkinson, Erik; Green, James C.; Cash, Webster

1993-01-01

The design, calibration, and sounding rocket flight performance of a novel spectrograph suitable for moderate-resolution EUV spectroscopy are presented. The sounding rocket-borne instrument uses a radial groove grating to maintain a high system efficiency while controlling the aberrations induced when doing spectroscopy in a converging beam. The instrument has a resolution of approximately 2 A across the 200-330 A bandpass with an average effective area of 2 sq cm. The instrument, called the Extreme Ultraviolet Spectrograph, acquired the first EUV spectra in this wavelength region of the hot white dwarf G191-B2B and the late-type star Capella.

Rabi oscillations in extreme ultraviolet ionization of atomic argon

NASA Astrophysics Data System (ADS)

Flögel, Martin; Durá, Judith; Schütte, Bernd; Ivanov, Misha; Rouzée, Arnaud; Vrakking, Marc J. J.

2017-02-01

We demonstrate Rabi oscillations in nonlinear ionization of argon by an intense femtosecond extreme ultraviolet (XUV) laser field produced by high-harmonic generation. We monitor the formation of A r2 + as a function of the time delay between the XUV pulse and an additional near-infrared (NIR) femtosecond laser pulse, and show that the population of an A r+* intermediate resonance exhibits strong modulations both due to an NIR laser-induced Stark shift and XUV-induced Rabi cycling between the ground state of A r+ and the A r+* excited state. Our experiment represents a direct experimental observation of a Rabi-cycling process in the XUV regime.

Note: Enhancement of the extreme ultraviolet emission from a potassium plasma by dual laser irradiation

DOE Office of Scientific and Technical Information (OSTI.GOV)

Higashiguchi, Takeshi, E-mail: higashi@cc.utsunomiya-u.ac.jp; Yamaguchi, Mami; Otsuka, Takamitsu

2014-09-15

Emission spectra from multiply charged potassium ions ranging from K{sup 3+} to K{sup 5+} have been obtained in the extreme ultraviolet (EUV) spectral region. A strong emission feature peaking around 38 nm, corresponding to a photon energy of 32.6 eV, is the dominant spectral feature at time-averaged electron temperatures in the range of 8−12 eV. The variation of this emission with laser intensity and the effects of pre-pulses on the relative conversion efficiency (CE) have been explored experimentally and indicate that an enhancement of about 30% in EUV CE is readily attainable.

A rocket measurement of the extreme ultraviolet dayglow

NASA Technical Reports Server (NTRS)

Christensen, A. B.

1976-01-01

Extreme ultraviolet spectra of the mid-latitude dayglow in the wavelength range of 550 to 1250A have been obtained with a rocket borne grating spectrometer at a resolution of 20A. Spectra were obtained in the altitude range of 140 to 280 km. The spectra are dominated by emissions from atomic multiplets and no molecular bands have been identified with certainty. The strongest emissions other than H Lyman-alpha are OI (989) and OII (834). Other prominent emissions include He I(584), N II(916) and N II(1085). An unexpected feature near 612A has an intensity comparable to He I(584).

High-resolution crystal spectrometer for the 10-60 A extreme ultraviolet region

DOE Office of Scientific and Technical Information (OSTI.GOV)

Beiersdorfer, P.; Brown, G.V.; Goddard, R.

2004-10-01

A vacuum crystal spectrometer with nominal resolving power approaching 1000 is described for measuring emission lines with wavelength in the extreme ultraviolet region up to 60 A. The instrument utilizes a flat octadecyl hydrogen maleate crystal and a thin-window 1D position-sensitive gas proportional detector. This detector employs a 1-{mu}m-thick 100x8 mm{sup 2} aluminized polyimide window and operates at one atmosphere pressure. The spectrometer has been implemented on the Livermore electron beam ion traps. The performance of the instrument is illustrated in measurements of the newly discovered magnetic field-sensitive line in Ar{sup 8+}.

MoRu/Be multilayers for extreme ultraviolet applications

DOEpatents

Bajt, Sasa C.; Wall, Mark A.

2001-01-01

High reflectance, low intrinsic roughness and low stress multilayer systems for extreme ultraviolet (EUV) lithography comprise amorphous layers MoRu and crystalline Be layers. Reflectance greater than 70% has been demonstrated for MoRu/Be multilayers with 50 bilayer pairs. Optical throughput of MoRu/Be multilayers can be 30-40% higher than that of Mo/Be multilayer coatings. The throughput can be improved using a diffusion barrier to make sharper interfaces. A capping layer on the top surface of the multilayer improves the long-term reflectance and EUV radiation stability of the multilayer by forming a very thin native oxide that is water resistant.

Extreme ultra-violet movie camera for imaging microsecond time scale magnetic reconnection

DOE Office of Scientific and Technical Information (OSTI.GOV)

Chai, Kil-Byoung; Bellan, Paul M.

2013-12-15

An ultra-fast extreme ultra-violet (EUV) movie camera has been developed for imaging magnetic reconnection in the Caltech spheromak/astrophysical jet experiment. The camera consists of a broadband Mo:Si multilayer mirror, a fast decaying YAG:Ce scintillator, a visible light block, and a high-speed visible light CCD camera. The camera can capture EUV images as fast as 3.3 × 10{sup 6} frames per second with 0.5 cm spatial resolution. The spectral range is from 20 eV to 60 eV. EUV images reveal strong, transient, highly localized bursts of EUV radiation when magnetic reconnection occurs.

Microchannel plate EUV detectors for the Extreme Ultraviolet Explorer

NASA Technical Reports Server (NTRS)

Siegmund, O. H. W.; Malina, R. F.; Coburn, K.; Werthimer, D.

1984-01-01

The design and operating characteristics of the prototype imaging microchannel plate (MCP) detector for the Extreme Ultraviolet Explorer (EUVE) Satellite are discussed. It is shown that this detector has achieved high position resolution performance (greater than 512 x 512 pixels) and has low (less than one percent) image distortion. In addition, the channel plate scheme used has tight pulse height distributions (less than 40 percent FWHM) for UV radiation and displays low (less than 0.2 cnt/sq cm-s) dark background counting rates. Work that has been done on EUV filters in relation to the envisaged filter and photocathode complement is also described.

Design, fabrication and performance of two grazing incidence telescopes for celestial extreme ultraviolet astronomy

NASA Technical Reports Server (NTRS)

Lampton, M.; Cash, W.; Malina, R. F.; Bowyer, S.

1977-01-01

The design and performance of grazing incidence telescopes for celestial extreme ultraviolet (EUV) astronomy are described. The telescopes basically consist of a star tracker, collimator, grazing incidence mirror, vacuum box lid, vacuum housing, filters, a ranicon detector, an electronics box, and an aspect camera. For the survey mirror a Wolter-Schwarzschild type II configuration was selected. Diamond-turning was used for mirror fabrication, a technique which machines surfaces to the order of 10 microns over the required dimensions. The design of the EUV spectrometer is discussed with particular reference to the optics for a primarily spectroscopic application and the fabrication of the f/10 optics.

EXTREME ULTRAVIOLET EXPLORER OBSERVATIONS OF HERCULES X-1 OVER A 35 DAY CYCLE

DOE Office of Scientific and Technical Information (OSTI.GOV)

Leahy, D. A.; Dupuis, Jean, E-mail: leahy@ucalgary.c

2010-06-01

Observations of Hercules X-1 by the Extreme Ultraviolet Explorer covering most of the 35 day cycle are reported here. This is the only long extreme ultraviolet (EUV) observation of Her X-1. Simultaneous X-ray observations with the Rossi X-ray Timing Explorer All-Sky Monitor (RXTE/ASM) X-ray show that Her X-1 is in an X-ray anomalous low state. The first 4 days are also observed with the RXTE proportional counter array (PCA), which shows that the X-ray properties are nearly the same as for normal low states in Her X-1 with flux reduced by a factor of 2. In contrast, the EUV emissionmore » from Her X-1 is reduced by a factor of {approx}4 compared to normal low states. The twisted-tilted accretion disk responsible for the normal 35 day X-ray cycle can be modified to explain this behavior. An increased disk twist reduces the X-ray illumination of HZ Her by a factor of {approx}2 and of the disk surface by a somewhat larger factor, leading to a larger reduction in EUV flux compared to X-ray flux.« less

Spectral photometry of extreme helium stars: Ultraviolet fluxes and effective temperature

NASA Technical Reports Server (NTRS)

Drilling, J. S.; Schoenberner, D.; Heber, U.; Lynas-Gray, A. E.

1982-01-01

Ultraviolet flux distributions are presented for the extremely helium rich stars BD +10 deg 2179, HD 124448, LSS 3378, BD -9 deg 4395, LSE 78, HD 160641, LSIV -1 deg 2, BD 1 deg 3438, HD 168476, MV Sgr, LS IV-14 deg 109 (CD -35 deg 11760), LSII +33 deg 5 and BD +1 deg 4381 (LSIV +2 deg 13) obtained with the International Ultraviolet Explorer (IUE). Broad band photometry and a newly computed grid of line blanketed model atmospheres were used to determine accurate angular diameters and total stellar fluxes. The resultant effective temperatures are in most cases in satisfactory agreement with those based on broad band photometry and/or high resolution spectroscopy in the visible. For two objects, LSII +33 deg 5 and LSE 78, disagreement was found between the IUE observations and broadband photometry: the colors predict temperatures around 20,000 K, whereas the UV spectra indicate much lower photospheric temperatures of 14,000 to 15,000 K. The new temperature scale for extreme helium stars extends to lower effective temperatures than that of Heber and Schoenberner (1981) and covers the range from 8,500 K to 32,000 K.

The Extreme Ultraviolet spectrometer on bard the Hisaki satellite

NASA Astrophysics Data System (ADS)

Yoshioka, K.; Murakami, G.; Yamazaki, A.; Tsuchiya, F.; Kagitani, M.; Kimura, T.; Yoshikawa, I.

2017-12-01

The extreme ultraviolet spectroscope EXCEED (EXtrem ultraviolet spetrosCope for ExosphEric Dynamics) on board the Hisaki satellite was launched in September 2013 from the Uchinoura space center, Japan. It is orbiting around the Earth with an orbital altitude of around 950-1150 km. This satellite is dedicated to and optimized for observing the atmosphere and magnetosphere of terrestrial planets such as Mercury, Venus, Mars, as well as Jupiter. The instrument consists of an off axis parabolic entrance mirror, switchable slits with multiple filters and shapes, a toroidal grating, and a photon counting detector, together with a field of view guiding camera. The design goal is to achieve a large effective area but with high spatial and spectral resolution. Based on the after-launch calibration, the spectral resolution of EXCEED is found to be 0.3-0.5 nm FWHM (Full Width at Half Maximum) over the entire spectral band, and the spatial resolution is around 17". The evaluated effective area is larger than 1cm2. In this presentation, the basic concept of the instrument design and the observation technique are introduced. The current status of the spacecraft and its future observation plan are also shown.

A giant planet undergoing extreme-ultraviolet irradiation by its hot massive-star host.

PubMed

Gaudi, B Scott; Stassun, Keivan G; Collins, Karen A; Beatty, Thomas G; Zhou, George; Latham, David W; Bieryla, Allyson; Eastman, Jason D; Siverd, Robert J; Crepp, Justin R; Gonzales, Erica J; Stevens, Daniel J; Buchhave, Lars A; Pepper, Joshua; Johnson, Marshall C; Colon, Knicole D; Jensen, Eric L N; Rodriguez, Joseph E; Bozza, Valerio; Novati, Sebastiano Calchi; D'Ago, Giuseppe; Dumont, Mary T; Ellis, Tyler; Gaillard, Clement; Jang-Condell, Hannah; Kasper, David H; Fukui, Akihiko; Gregorio, Joao; Ito, Ayaka; Kielkopf, John F; Manner, Mark; Matt, Kyle; Narita, Norio; Oberst, Thomas E; Reed, Phillip A; Scarpetta, Gaetano; Stephens, Denice C; Yeigh, Rex R; Zambelli, Roberto; Fulton, B J; Howard, Andrew W; James, David J; Penny, Matthew; Bayliss, Daniel; Curtis, Ivan A; DePoy, D L; Esquerdo, Gilbert A; Gould, Andrew; Joner, Michael D; Kuhn, Rudolf B; Labadie-Bartz, Jonathan; Lund, Michael B; Marshall, Jennifer L; McLeod, Kim K; Pogge, Richard W; Relles, Howard; Stockdale, Christopher; Tan, T G; Trueblood, Mark; Trueblood, Patricia

2017-06-22

The amount of ultraviolet irradiation and ablation experienced by a planet depends strongly on the temperature of its host star. Of the thousands of extrasolar planets now known, only six have been found that transit hot, A-type stars (with temperatures of 7,300-10,000 kelvin), and no planets are known to transit the even hotter B-type stars. For example, WASP-33 is an A-type star with a temperature of about 7,430 kelvin, which hosts the hottest known transiting planet, WASP-33b (ref. 1); the planet is itself as hot as a red dwarf star of type M (ref. 2). WASP-33b displays a large heat differential between its dayside and nightside, and is highly inflated-traits that have been linked to high insolation. However, even at the temperature of its dayside, its atmosphere probably resembles the molecule-dominated atmospheres of other planets and, given the level of ultraviolet irradiation it experiences, its atmosphere is unlikely to be substantially ablated over the lifetime of its star. Here we report observations of the bright star HD 195689 (also known as KELT-9), which reveal a close-in (orbital period of about 1.48 days) transiting giant planet, KELT-9b. At approximately 10,170 kelvin, the host star is at the dividing line between stars of type A and B, and we measure the dayside temperature of KELT-9b to be about 4,600 kelvin. This is as hot as stars of stellar type K4 (ref. 5). The molecules in K stars are entirely dissociated, and so the primary sources of opacity in the dayside atmosphere of KELT-9b are probably atomic metals. Furthermore, KELT-9b receives 700 times more extreme-ultraviolet radiation (that is, with wavelengths shorter than 91.2 nanometres) than WASP-33b, leading to a predicted range of mass-loss rates that could leave the planet largely stripped of its envelope during the main-sequence lifetime of the host star.

THE MUSCLES TREASURY SURVEY. II. INTRINSIC LY α AND EXTREME ULTRAVIOLET SPECTRA OF K AND M DWARFS WITH EXOPLANETS

DOE Office of Scientific and Technical Information (OSTI.GOV)

Youngblood, Allison; France, Kevin; Loyd, R. O. Parke

2016-06-20

The ultraviolet (UV) spectral energy distributions (SEDs) of low-mass (K- and M-type) stars play a critical role in the heating and chemistry of exoplanet atmospheres, but are not observationally well-constrained. Direct observations of the intrinsic flux of the Ly α line (the dominant source of UV photons from low-mass stars) are challenging, as interstellar H i absorbs the entire line core for even the closest stars. To address the existing gap in empirical constraints on the UV flux of K and M dwarfs, the MUSCLES Hubble Space Telescope Treasury Survey has obtained UV observations of 11 nearby M and Kmore » dwarfs hosting exoplanets. This paper presents the Ly α and extreme-UV spectral reconstructions for the MUSCLES targets. Most targets are optically inactive, but all exhibit significant UV activity. We use a Markov Chain Monte Carlo technique to correct the observed Ly α profiles for interstellar absorption, and we employ empirical relations to compute the extreme-UV SED from the intrinsic Ly α flux in ∼100 Å bins from 100–1170 Å. The reconstructed Ly α profiles have 300 km s{sup −1} broad cores, while >1% of the total intrinsic Ly α flux is measured in extended wings between 300 and 1200 km s{sup −1}. The Ly α surface flux positively correlates with the Mg ii surface flux and negatively correlates with the stellar rotation period. Stars with larger Ly α surface flux also tend to have larger surface flux in ions formed at higher temperatures, but these correlations remain statistically insignificant in our sample of 11 stars. We also present H i column density measurements for 10 new sightlines through the local interstellar medium.« less

The Role of Inverse Compton Scattering in Solar Coronal Hard X-Ray and γ-Ray Sources

NASA Astrophysics Data System (ADS)

Chen, Bin; Bastian, T. S.

2012-05-01

Coronal hard X-ray (HXR) and continuum γ-ray sources associated with the impulsive phase of solar flares have been the subject of renewed interest in recent years. They have been interpreted in terms of thin-target, non-thermal bremsstrahlung emission. This interpretation has led to rather extreme physical requirements in some cases. For example, in one case, essentially all of the electrons in the source must be accelerated to non-thermal energies to account for the coronal HXR source. In other cases, the extremely hard photon spectra of the coronal continuum γ-ray emission suggest that the low-energy cutoff of the electron energy distribution lies in the MeV energy range. Here, we consider the role of inverse Compton scattering (ICS) as an alternate emission mechanism in both the ultra- and mildly relativistic regimes. It is known that relativistic electrons are produced during powerful flares; these are capable of upscattering soft photospheric photons to HXR and γ-ray energies. Previously overlooked is the fact that mildly relativistic electrons, generally produced in much greater numbers in flares of all sizes, can upscatter extreme-ultraviolet/soft X-ray photons to HXR energies. We also explore ICS on anisotropic electron distributions and show that the resulting emission can be significantly enhanced over an isotropic electron distribution for favorable viewing geometries. We briefly review results from bremsstrahlung emission and reconsider circumstances under which non-thermal bremsstrahlung or ICS would be favored. Finally, we consider a selection of coronal HXR and γ-ray events and find that in some cases the ICS is a viable alternative emission mechanism.

Spectrally resolved single-shot wavefront sensing of broadband high-harmonic sources

NASA Astrophysics Data System (ADS)

Freisem, L.; Jansen, G. S. M.; Rudolf, D.; Eikema, K. S. E.; Witte, S.

2018-03-01

Wavefront sensors are an important tool to characterize coherent beams of extreme ultraviolet radiation. However, conventional Hartmann-type sensors do not allow for independent wavefront characterization of different spectral components that may be present in a beam, which limits their applicability for intrinsically broadband high-harmonic generation (HHG) sources. Here we introduce a wavefront sensor that measures the wavefronts of all the harmonics in a HHG beam in a single camera exposure. By replacing the mask apertures with transmission gratings at different orientations, we simultaneously detect harmonic wavefronts and spectra, and obtain sensitivity to spatiotemporal structure such as pulse front tilt as well. We demonstrate the capabilities of the sensor through a parallel measurement of the wavefronts of 9 harmonics in a wavelength range between 25 and 49 nm, with up to lambda/32 precision.

Compact 200 kHz HHG source driven by a few-cycle OPCPA

NASA Astrophysics Data System (ADS)

Harth, Anne; Guo, Chen; Cheng, Yu-Chen; Losquin, Arthur; Miranda, Miguel; Mikaelsson, Sara; Heyl, Christoph M.; Prochnow, Oliver; Ahrens, Jan; Morgner, Uwe; L'Huillier, Anne; Arnold, Cord L.

2018-01-01

We present efficient high-order harmonic generation (HHG) based on a high-repetition rate, few-cycle, near infrared (NIR), carrier-envelope phase stable, optical parametric chirped pulse amplifier (OPCPA), emitting 6 fs pulses with 9 μJ pulse energy. In krypton, we reach conversion efficiencies from the NIR to the extreme ultraviolet (XUV) radiation pulse energy on the order of ˜10-6 with less than 3 μJ driving pulse energy. This is achieved by optimizing the OPCPA for a spatially and temporally clean pulse and by a specially designed high-pressure gas target. In the future, the high efficiency of the HHG source will be beneficial for high-repetition rate two-colour (NIR-XUV) pump-probe experiments, where the available pulse energy from the laser has to be distributed economically between pump and probe pulses.

Ultra-broadband ptychography with self-consistent coherence estimation from a high harmonic source

NASA Astrophysics Data System (ADS)

Odstrčil, M.; Baksh, P.; Kim, H.; Boden, S. A.; Brocklesby, W. S.; Frey, J. G.

2015-09-01

With the aim of improving imaging using table-top extreme ultraviolet sources, we demonstrate coherent diffraction imaging (CDI) with relative bandwidth of 20%. The coherence properties of the illumination probe are identified using the same imaging setup. The presented methods allows for the use of fewer monochromating optics, obtaining higher flux at the sample and thus reach higher resolution or shorter exposure time. This is important in the case of ptychography when a large number of diffraction patterns need to be collected. Our microscopy setup was tested on a reconstruction of an extended sample to show the quality of the reconstruction. We show that high harmonic generation based EUV tabletop microscope can provide reconstruction of samples with a large field of view and high resolution without additional prior knowledge about the sample or illumination.

Plasma-based EUV light source

DOEpatents

Shumlak, Uri; Golingo, Raymond; Nelson, Brian A.

2010-11-02

Various mechanisms are provided relating to plasma-based light source that may be used for lithography as well as other applications. For example, a device is disclosed for producing extreme ultraviolet (EUV) light based on a sheared plasma flow. The device can produce a plasma pinch that can last several orders of magnitude longer than what is typically sustained in a Z-pinch, thus enabling the device to provide more power output than what has been hitherto predicted in theory or attained in practice. Such power output may be used in a lithography system for manufacturing integrated circuits, enabling the use of EUV wavelengths on the order of about 13.5 nm. Lastly, the process of manufacturing such a plasma pinch is discussed, where the process includes providing a sheared flow of plasma in order to stabilize it for long periods of time.

An Investigation of Atmospheric Emissions in Ultraviolet, Vacuum Ultraviolet and Extreme Ultraviolet Wavelengths

DTIC Science & Technology

1989-07-01

from the A3E state to the X’E; ground state. with a total intensity of 383 kR for an IBC II aurora ( Vallance - The VK vibrational energy levels are...8051-8062, 1983. Ajello, J. M., and D. E. Shemansky, A reexamination of important N2 Vallance -Jones, A., Aurora, D. Reidel, Hingham, Mass., 1974...biasing this excitation has been reported. The (3-10) band at 1928X, which comprises 1.37 % of the m entire LBH band system intensity. ( Vallance

Dancing to the MUSSIC: Steps towards creating a Multisatellite Ultraviolet Solar Spectral Irradiance Composite

NASA Astrophysics Data System (ADS)

Snow, M. A.; Machol, J. L.; Richard, E. C.

2016-12-01

Solar spectral irradiance (SSI) has been measured since the beginning of the satellite era in 1978, but the observational record has many gaps in both wavelength and time. We describe our current effort in linking several such datasets ranging from the Extreme Ultraviolet to the Near Ultraviolet (0-400 nm). This wavelength range includes two important solar activity proxies, the Magnesium II core—to-wing ratio and the Lyman alpha irradiance, and special attention will be applied to these two wavelength intervals.

Ultraviolet spectrophotometry from Gemini 11 of stars in Orion

NASA Technical Reports Server (NTRS)

Morgan, T. H.; Spear, G. G.; Kondo, Y.; Henize, K. G.

1975-01-01

Ultraviolet spectrophotometry in the wavelength region 2600-3600 A is reported for the bright early-type stars beta, eta, gamma, delta, iota, epsilon, sigma, zeta, and kappa Ori. The results are in good agreement with other observations, and, with the possible exception of the supergiants, are in good agreement with recent line-blanketed model atmospheres. There is evidence that the supergiants possess a small ultraviolet deficiency shortward of 3000 A relative to main-sequence stars of similar spectral type. The most extreme example of this phenomenon is the star kappa Ori.

Skylab

NASA Image and Video Library

1973-01-01

This chart describes Skylab's Extreme Ultraviolet (XUV) Coronal Spectroheliograph, one of the eight Apollo Telescope Mount facilities. It was designed to sequentially photograph the solar chromosphere and corona in selected ultraviolet wavelengths . The instrument also obtained information about composition, temperature, energy conversion and transfer, and plasma processes of the chromosphere and lower corona. The Marshall Space Flight Center had program management responsibility for the development of Skylab hardware and experiments.

Ultraviolet Imaging Telescope (UIT) observations of galaxies

NASA Technical Reports Server (NTRS)

Neff, S. G.

1993-01-01

Ultraviolet images of several galaxies were obtained during the ASTRO-1 shuttle mission in December, 1990. The images have a FWHM angular resolution of approximately 3 arcsecond and are of circular fields approximately 40 arcminutes in diameter. Most galaxies were observed in at least two and sometimes as many as four broad bands. A very few fields were observed with narrower band filters. The most basic result of these observations is that most systems look dramatically different in the UV from their well-known optical appearances. Preliminary results of these studies will be presented. Information will be available on fields observed by the UTI during the ASTRO 1 mission; when that data becomes public it can be obtained from the NSSDC. The ASTRO observatory is expected to fly again in 1994 with approximately half of the observing time from that mission devoted to guest observers. The Ultraviolet Imaging telescope is extremely well suited for galaxy studies, and the UIT term is interested in encouraging a wide range of scientific studies by guest observers. Ultraviolet Imaging telescope is extremely well suited for galaxy studies, and the UIT team is interested in encouraging a wide range of scientific studies by guest observers.

Understanding the Early Evolution of M dwarf Extreme Ultraviolet Radiation

NASA Astrophysics Data System (ADS)

Peacock, Sarah; Barman, Travis; Shkolnik, Evgenya

2015-11-01

The chemistry and evolution of planetary atmospheres depends on the evolution of high-energy radiation emitted by its host star. High levels of extreme ultraviolet (EUV) radiation can drastically alter the atmospheres of terrestrial planets through ionizing, heating, expanding, chemically modifying and eroding them during the first few billion years of a planetary lifetime. While there is evidence that stars emit their highest levels of far and near ultraviolet (FUV; NUV) radiation in the earliest stages of their evolution, we are currently unable to directly measure the EUV radiation. Most previous stellar atmosphere models under-predict FUV and EUV emission from M dwarfs; here we present new models for M stars that include prescriptions for the hot, lowest density atmospheric layers (chromosphere, transition region and corona), from which this radiation is emitted. By comparing our model spectra to GALEX near and far ultraviolet fluxes, we are able to predict the evolution of EUV radiation for M dwarfs from 10 Myr to a few Gyr. This research is the next major step in the HAZMAT (HAbitable Zones and M dwarf Activity across Time) project to analyze how the habitable zone evolves with the evolving properties of stellar and planetary atmospheres.

Supernova of 1006 (G327.6+14.6)

NASA Astrophysics Data System (ADS)

Katsuda, Satoru

SN 1006 (G327.6 + 14.6) was the brightest supernova (SN) witnessed in human history. As of 1000 years later, it stands out as an ideal laboratory to study Type Ia SNe and shocks in supernova remnants (SNRs). The present state of knowledge about SN 1006 is reviewed in this article. No star consistent with a surviving companion expected in the traditional single-degenerate scenario has been found, which favors a double-degenerate scenario for the progenitor of SN 1006. Both unshocked and shocked SN ejecta have been probed through absorption lines in ultraviolet spectra of a few background sources and thermal X-ray emission, respectively. The absorption studies suggest that the amount of iron is < 0.16 M⊙, which is significantly less than the range for normal SNe Ia. On the other hand, analyses of X-ray data reveal the distribution of shocked ejecta to be highly asymmetric especially for iron. Therefore, most of iron might have escaped from the ultraviolet background sources. Another important aspect with SN 1006 is that it was the first SNR in which synchrotron X-ray emission was detected from shells of the remnant, providing evidence that electrons are accelerated up to ˜ 100 TeV energies at forward shocks. The bilateral symmetry of the synchrotron emission (bright in northeastern and southwestern limbs) is likely due to a polar cap geometry. The broadband (radio, X-ray, and gamma ray) spectral energy distribution suggests that the gamma ray emission is predominantly leptonic. At the northwestern shock, evidence for extreme, but less than mass-proportional, temperature non-equilibration has been found by optical, ultraviolet, and X-ray observations.

Optimizing image-based patterned defect inspection through FDTD simulations at multiple ultraviolet wavelengths

NASA Astrophysics Data System (ADS)

Barnes, Bryan M.; Zhou, Hui; Henn, Mark-Alexander; Sohn, Martin Y.; Silver, Richard M.

2017-06-01

The sizes of non-negligible defects in the patterning of a semiconductor device continue to decrease as the dimensions for these devices are reduced. These "killer defects" disrupt the performance of the device and must be adequately controlled during manufacturing, and new solutions are required to improve optics-based defect inspection. To this end, our group has reported [Barnes et al., Proc. SPIE 1014516 (2017)] our initial five-wavelength simulation study, evaluating the extensibility of defect inspection by reducing the inspection wavelength from a deep-ultraviolet wavelength to wavelengths in the vacuum ultraviolet and the extreme ultraviolet. In that study, a 47 nm wavelength yielded enhancements in the signal to noise (SNR) by a factor of five compared to longer wavelengths and in the differential intensities by as much as three orders-of-magnitude compared to 13 nm. This paper briefly reviews these recent findings and investigates the possible sources for these disparities between results at 13 nm and 47 nm wavelengths. Our in-house finite-difference time-domain code (FDTD) is tested in both two and three dimensions to determine how computational conditions contributed to the results. A modified geometry and materials stack is presented that offers a second viewpoint of defect detectability as functions of wavelength, polarization, and defect type. Reapplication of the initial SNR-based defect metric again yields no detection of a defect at λ = 13 nm, but additional image preprocessing now enables the computation of the SNR for λ = 13 nm simulated images and has led to a revised defect metric that allows comparisons at all five wavelengths.

EFFECTS OF ULTRAVIOLET RADIATION ON THE MODERATE HALOPHILE HALOMONAS ELONGATA AND THE EXTREME HALOPHILE HALOBACTERIUM SALINARUM

EPA Science Inventory

Both the moderately halophilic bacterium, Halomonas elongata, and the extremely halophilic archaea, Halobacterium salinarum, can be found in hypersaline environments (e.g., salterns). On complex media, H. elongata grows over a salt range of 0.05-5.2 M, whereas, H. salinarum multi...

EIT: Solar corona synoptic observations from SOHO with an Extreme-ultraviolet Imaging Telescope

NASA Technical Reports Server (NTRS)

Delaboudiniere, J. P.; Gabriel, A. H.; Artzner, G. E.; Michels, D. J.; Dere, K. P.; Howard, R. A.; Catura, R.; Stern, R.; Lemen, J.; Neupert, W.

1988-01-01

The Extreme-ultraviolet Imaging Telescope (EIT) of SOHO (solar and heliospheric observatory) will provide full disk images in emission lines formed at temperatures that map solar structures ranging from the chromospheric network to the hot magnetically confined plasma in the corona. Images in four narrow bandpasses will be obtained using normal incidence multilayered optics deposited on quadrants of a Ritchey-Chretien telescope. The EIT is capable of providing a uniform one arc second resolution over its entire 50 by 50 arc min field of view. Data from the EIT will be extremely valuable for identifying and interpreting the spatial and temperature fine structures of the solar atmosphere. Temporal analysis will provide information on the stability of these structures and identify dynamical processes. EIT images, issued daily, will provide the global corona context for aid in unifying the investigations and in forming the observing plans for SOHO coronal instruments.

Alignment of a multilayer-coated imaging system using extreme ultraviolet Foucault and Ronchi interferometric testing

DOE Office of Scientific and Technical Information (OSTI.GOV)

Ray-Chaudhuri, A.K.; Ng, W.; Cerrina, F.

1995-11-01

Multilayer-coated imaging systems for extreme ultraviolet (EUV) lithography at 13 nm represent a significant challenge for alignment and characterization. The standard practice of utilizing visible light interferometry fundamentally provides an incomplete picture since this technique fails to account for phase effects induced by the multilayer coating. Thus the development of optical techniques at the functional EUV wavelength is required. We present the development of two EUV optical tests based on Foucault and Ronchi techniques. These relatively simple techniques are extremely sensitive due to the factor of 50 reduction in wavelength. Both techniques were utilized to align a Mo--Si multilayer-coated Schwarzschildmore » camera. By varying the illumination wavelength, phase shift effects due to the interplay of multilayer coating and incident angle were uniquely detected. {copyright} {ital 1995} {ital American} {ital Vacuum} {ital Society}« less

Generating circularly polarized radiation in the extreme ultraviolet spectral range at the free-electron laser FLASH

NASA Astrophysics Data System (ADS)

von Korff Schmising, Clemens; Weder, David; Noll, Tino; Pfau, Bastian; Hennecke, Martin; Strüber, Christian; Radu, Ilie; Schneider, Michael; Staeck, Steffen; Günther, Christian M.; Lüning, Jan; Merhe, Alaa el dine; Buck, Jens; Hartmann, Gregor; Viefhaus, Jens; Treusch, Rolf; Eisebitt, Stefan

2017-05-01

A new device for polarization control at the free electron laser facility FLASH1 at DESY has been commissioned for user operation. The polarizer is based on phase retardation upon reflection off metallic mirrors. Its performance is characterized in three independent measurements and confirms the theoretical predictions of efficient and broadband generation of circularly polarized radiation in the extreme ultraviolet spectral range from 35 eV to 90 eV. The degree of circular polarization reaches up to 90% while maintaining high total transmission values exceeding 30%. The simple design of the device allows straightforward alignment for user operation and rapid switching between left and right circularly polarized radiation.

Broadband interference lithography at extreme ultraviolet and soft x-ray wavelengths.

PubMed

Mojarad, Nassir; Fan, Daniel; Gobrecht, Jens; Ekinci, Yasin

2014-04-15

Manufacturing efficient and broadband optics is of high technological importance for various applications in all wavelength regimes. Particularly in the extreme ultraviolet and soft x-ray spectra, this becomes challenging due to the involved atomic absorption edges that rapidly change the optical constants in these ranges. Here we demonstrate a new interference lithography grating mask that can be used for nanopatterning in this spectral range. We demonstrate photolithography with cutting-edge resolution at 6.5 and 13.5 nm wavelengths, relevant to the semiconductor industry, as well as using 2.5 and 4.5 nm wavelength for patterning thick photoresists and fabricating high-aspect-ratio metal nanostructures for plasmonics and sensing applications.

Electron impact excitation of argon in the extreme vacuum ultraviolet

NASA Technical Reports Server (NTRS)

Mentall, J. E.; Morgan, H. D.

1976-01-01

Polarization-free excitation cross sections in the extreme vacuum ultraviolet have been measured for electron impact on Ar. Observed spectral features were those lines of Ar I and Ar II which lie between 700 and 1100 A. Excitation functions were measured for the Ar I resonance line at 1048 A and the Ar II resonance line at 920 A. Peak cross sections for these two lines were found to be (39.4 plus or minus 7.9) x 10 to the -18th and (6.9 plus or minus 1.4) x 10 to the -18th, respectively. At low energies, excitation of the Ar II resonance line is dominated by an electron exchange transition.

Correlated proton-electron hole dynamics in protonated water clusters upon extreme ultraviolet photoionization

PubMed Central

Li, Zheng; Vendrell, Oriol

2016-01-01

The ultrafast nuclear and electronic dynamics of protonated water clusters H+(H2O)n after extreme ultraviolet photoionization is investigated. In particular, we focus on cluster cations with n = 3, 6, and 21. Upon ionization, two positive charges are present in the cluster related to the excess proton and the missing electron, respectively. A correlation is found between the cluster's geometrical conformation and initial electronic energy with the size of the final fragments produced. For situations in which the electron hole and proton are initially spatially close, the two entities become correlated and separate in a time-scale of 20 to 40 fs driven by strong non-adiabatic effects. PMID:26798842

Passivating overcoat bilayer for multilayer reflective coatings for extreme ultraviolet lithography

DOEpatents

Montcalm, Claude; Stearns, Daniel G.; Vernon, Stephen P.

1999-01-01

A passivating overcoat bilayer is used for multilayer reflective coatings for extreme ultraviolet (EUV) or soft x-ray applications to prevent oxidation and corrosion of the multilayer coating, thereby improving the EUV optical performance. The overcoat bilayer comprises a layer of silicon or beryllium underneath at least one top layer of an elemental or a compound material that resists oxidation and corrosion. Materials for the top layer include carbon, palladium, carbides, borides, nitrides, and oxides. The thicknesses of the two layers that make up the overcoat bilayer are optimized to produce the highest reflectance at the wavelength range of operation. Protective overcoat systems comprising three or more layers are also possible.

Observations of solar active regions and solar flares by OSO-7

NASA Technical Reports Server (NTRS)

Neupert, W. M.

1977-01-01

Contributions made to the physics of coronal active regions and flares by the extreme ultraviolet and soft X-ray spectroheliograph on OSO-7 were discussed. Coronal structures above active regions were discussed from the point of view of their morphology and physical properties, including their relationship to photospheric and coronal magnetic fields. OSO-7 also recorded flares with sufficient spatial and temporal resolution to record, in some instances for the first time, the extreme ultraviolet and soft X-ray emission associated with such chromospheric phenomena as filament activation and the emergence of satellite sunspots. Flare phenomena were reviewed in terms of the several stages of evolution typically associated with the event.

The Extreme-ultraviolet Emission from Sun-grazing Comets

NASA Technical Reports Server (NTRS)

Bryans, Paul; Pesnell, William D.

2012-01-01

The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory has observed two Sun-grazing comets as they passed through the solar atmosphere. Both passages resulted in a measurable enhancement of extreme-ultraviolet (EUV) radiance in several of the AIA bandpasses.We explain this EUV emission by considering the evolution of the cometary atmosphere as it interacts with the ambient solar atmosphere. Molecules in the comet rapidly sublimate as it approaches the Sun. They are then photodissociated by the solar radiation field to create atomic species. Subsequent ionization of these atoms produces a higher abundance of ions than normally present in the corona and results in EUV emission in the wavelength ranges of the AIA telescope passbands.

Grazing incidence metal optics for the Berkeley Extreme Ultraviolet Explorer satellite - A progress report

NASA Technical Reports Server (NTRS)

Finley, D.; Malina, R. F.; Bowyer, S.

1985-01-01

The four flight Wolter-Schwarzschild mirrors currently under fabrication for the Extreme Ultraviolet Explorer (EUVE) satellite are described. The principal figuring operation of these grazing incidence metal mirrors (gold over nickel on an aluminum substrate) is carried out by diamond turning at the Lawrence Livermore National Laboratories. Turning has been accomplished and optical testing results analyzed for three of the mirrors. As-turned values of 1.7 arc sec full width at half maximum (FWHM) and half energy width (HEW) of 5 arc seconds in the visible have been achieved. These results illustrate the great potential of precision fabrication technology for the production of large grazing incidence optics.

Broadband extreme ultraviolet probing of transient gratings in vanadium dioxide

DOE PAGES

Sistrunk, Emily; Grilj, Jakob; Jeong, Jaewoo; ...

2015-02-11

Nonlinear spectroscopy in the extreme ultraviolet (EUV) and soft x-ray spectral range offers the opportunity for element selective probing of ultrafast dynamics using core-valence transitions (Mukamel et al., Acc. Chem. Res. 42, 553 (2009)). The study demonstrate a step on this path showing core-valence sensitivity in transient grating spectroscopy with EUV probing. We study the optically induced insulator-to-metal transition (IMT) of a VO 2 film with EUV diffraction from the optically excited sample. The VO 2 exhibits a change in the 3p-3d resonance of V accompanied by an acoustic response. Due to the broadband probing we are able to separatemore » the two features.« less

Extreme ultraviolet spectra of S IX and S X relevant to solar coronal plasmas

NASA Astrophysics Data System (ADS)

Ali, Safdar; Kato, Hiroyuki; Nakamura, Nobuyuki

2017-10-01

We present extreme ultraviolet laboratory spectra of highly charged S IX and S X measured using a compact electron beam ion trap. The data were recorded using a flat-field grazing incidence spectrometer in the wavelength range between 210 and 290 Å. The beam energy was tuned for three different values at 365, 410 and 465 eV while keeping electron beam current constant at 10 mA. By measuring the beam energy dependence, we identified several lines originating from S IX and S X ions with the support of collisional-radiative modeling. We compared them with the present calculations and transitions listed in the NIST data base and found in good agreement.

Ultrafast Extreme Ultraviolet Spectroscopy of Methylammonium Lead Iodide Perovskite for Carrier Specific Photophysics

NASA Astrophysics Data System (ADS)

Verkamp, Max A.; Lin, Ming-Fu; Ryland, Elizabeth S.; Benke, Kristin; Vura-Weis, Josh

2017-06-01

Methyl ammonium lead iodide (perovskite) is a leading candidate for next-generation solar cell devices. However, the fundamental photophysics responsible for its strong photovoltaic qualities are not fully understood. Ultrafast extreme ultraviolet (XUV) spectroscopy was used to investigate relaxation dynamics in perovskite with carrier specific signals arising from transitions from the common inner-shell level (I 4d) to the valence and conduction bands. Ultrashort (30 fs) pulses of XUV radiation in a broad spectrum (40-70 eV) were obtained using high-harmonic generation in a tabletop instrument. Transient absorption measurements with visible pump and XUV probe directly observed the dynamics of charge carriers after above-band and band-edge excitation.

Up-down asymmetry measurement of tungsten distribution in large helical device using two extreme ultraviolet (EUV) spectrometers

DOE Office of Scientific and Technical Information (OSTI.GOV)

Liu, Y., E-mail: liu.yang@nifs.ac.jp; Zhang, H. M.; Morita, S.

Two space-resolved extreme ultraviolet spectrometers working in wavelength ranges of 10-130 Å and 30-500 Å have been utilized to observe the full vertical profile of tungsten line emissions by simultaneously measuring upper- and lower-half plasmas of LHD, respectively. The radial profile of local emissivity is reconstructed from the measured vertical profile in the overlapped wavelength range of 30-130 Å and the up-down asymmetry is examined against the local emissivity profiles of WXXVIII in the unresolved transition array spectrum. The result shows a nearly symmetric profile, suggesting a good availability in the present diagnostic method for the impurity asymmetry study.

High numerical aperture projection system for extreme ultraviolet projection lithography

DOEpatents

Hudyma, Russell M.

2000-01-01

An optical system is described that is compatible with extreme ultraviolet radiation and comprises five reflective elements for projecting a mask image onto a substrate. The five optical elements are characterized in order from object to image as concave, convex, concave, convex, and concave mirrors. The optical system is particularly suited for ring field, step and scan lithography methods. The invention uses aspheric mirrors to minimize static distortion and balance the static distortion across the ring field width which effectively minimizes dynamic distortion. The present invention allows for higher device density because the optical system has improved resolution that results from the high numerical aperture, which is at least 0.14.

EUNIS; Extreme-Ultraviolet Normal-Incidence Spectrometer

NASA Technical Reports Server (NTRS)

Thomas, Roger J.; Davila, Joseph M.; Fisher, Richard R. (Technical Monitor)

2001-01-01

GSFC is in the process of assembling an Extreme-Ultraviolet Normal Incidence Spectrometer called EUNIS, to be flown as a sounding rocket payload. The instrument builds on the many technical innovations pioneered by our highly successful SERTS experiment, which has now flown a total of ten times, most recently last summer. The new design will have somewhat improved spatial and spectral resolutions, as well as two orders of magnitude greater sensitivity, permitting high signal/noise EUV spectroscopy with a temporal resolution near 1 second for the first time ever. In order to achieve such high time cadence, a novel detector system is being developed, based on Active-Pixel-Sensor electronics, a key component of our design.

Method for high-precision multi-layered thin film deposition for deep and extreme ultraviolet mirrors

DOEpatents

Ruffner, Judith Alison

1999-01-01

A method for coating (flat or non-flat) optical substrates with high-reflectivity multi-layer coatings for use at Deep Ultra-Violet ("DUV") and Extreme Ultra-Violet ("EUV") wavelengths. The method results in a product with minimum feature sizes of less than 0.10-.mu.m for the shortest wavelength (13.4-nm). The present invention employs a computer-based modeling and deposition method to enable lateral and vertical thickness control by scanning the position of the substrate with respect to the sputter target during deposition. The thickness profile of the sputter targets is modeled before deposition and then an appropriate scanning algorithm is implemented to produce any desired, radially-symmetric thickness profile. The present invention offers the ability to predict and achieve a wide range of thickness profiles on flat or figured substrates, i.e., account for 1/R.sup.2 factor in a model, and the ability to predict and accommodate changes in deposition rate as a result of plasma geometry, i.e., over figured substrates.

ZnO quantum dot-doped graphene/h-BN/GaN-heterostructure ultraviolet photodetector with extremely high responsivity.

PubMed

Lu, Yanghua; Wu, Zhiqian; Xu, Wenli; Lin, Shisheng

2016-12-02

A ZnO quantum dot  photo-doped graphene/h-BN/GaN-heterostructure ultraviolet photodetector with extremely high responsivity of more than 1915 A W -1 and detectivity of more than 1.02 × 10 13 Jones (Jones = cm Hz 1/2 W -1 ) has been demonstrated. The interfaced h-BN layer increases the barrier height at the graphene/GaN heterojunction, which decreases the dark current and improves the on/off current ratio of the device. The photo-doping effect increases the barrier height and carrier concentration at the graphene/h-BN/GaN heterojunction, thus the responsivity is improved from 1473 A W -1 to 1915 A W -1 and the detectivity is improved from 5.8 × 10 12 to 1.0 × 10 13 Jones. Moreover, all of the responsivity and detectivity values are the highest values among all the graphene-based ultraviolet photodetectors.

X-ray and extreme ultraviolet spectroscopy on DIII-D

NASA Astrophysics Data System (ADS)

Victor, B. S.; Allen, S. L.; Beiersdorfer, P.; Magee, E. W.

2017-06-01

Two spectrometers were installed to measure tungsten emission in the core of DIII-D plasmas during a metal rings experimental campaign. The spectral range of the high-resolution (1340 spectral channels), variable-ruled grating X-ray and Extreme Ultraviolet Spectrometer (XEUS) extends from 10-71 dot A. The spectral range of the second spectrometer, the Long-Wavelength Extreme Ultraviolet Spectrometer (LoWEUS), measures between 31-174 dot A. Three groups of tungsten lines were identified with XEUS: W38+-W45+ from 47-63 dot A, W27+-W35+ from 45-55 dot A, and W28+-W33+ from 16-30 dot A. Emission lines from tungsten charge states W28+, W43+, W44+, and W45+ are identified and the line amplitude is presented versus time. Peak emission of W43+-W45+ occurs between core Te=2.5-3 keV, and peak emission of W28+ occurs at core Te<=1.3 keV. One group of tungsten lines, W40+-W45+, between 120-140 dot A, was identified with LoWEUS. W43+-W45+ lines measured with LoWEUS track the sawtooth cycle. Sensitivity to the sawtooth cycle and the correlation of the peak emission with core electron temperature show that these spectrometers track the on-axis tungsten emission of DIII-D plasmas.

Miniaturized High-Speed Modulated X-Ray Source

NASA Technical Reports Server (NTRS)

Gendreau, Keith C. (Inventor); Arzoumanian, Zaven (Inventor); Kenyon, Steven J. (Inventor); Spartana, Nick Salvatore (Inventor)

2015-01-01

A miniaturized high-speed modulated X-ray source (MXS) device and a method for rapidly and arbitrarily varying with time the output X-ray photon intensities and energies. The MXS device includes an ultraviolet emitter that emits ultraviolet light, a photocathode operably coupled to the ultraviolet light-emitting diode that emits electrons, an electron multiplier operably coupled to the photocathode that multiplies incident electrons, and an anode operably coupled to the electron multiplier that is configured to produce X-rays. The method for modulating MXS includes modulating an intensity of an ultraviolet emitter to emit ultraviolet light, generating electrons in response to the ultraviolet light, multiplying the electrons to become more electrons, and producing X-rays by an anode that includes a target material configured to produce X-rays in response to impact of the more electrons.

Probing ultrafast spin dynamics with high-harmonic magnetic circular dichroism spectroscopy

NASA Astrophysics Data System (ADS)

Willems, F.; Smeenk, C. T. L.; Zhavoronkov, N.; Kornilov, O.; Radu, I.; Schmidbauer, M.; Hanke, M.; von Korff Schmising, C.; Vrakking, M. J. J.; Eisebitt, S.

2015-12-01

Magnetic circular dichroism in the extreme ultraviolet (XUV) spectral range is a powerful technique for element-specific probing of magnetization in multicomponent magnetic alloys and multilayers. We combine a high-harmonic generation source with a λ /4 phase shifter to obtain circularly polarized XUV femtosecond pulses for ultrafast magnetization studies. We report on simultaneously measured resonant magnetic circular dichroism (MCD) of Co and Ni at their respective M2 ,3 edges and of Pt at its O edge, originating from interface magnetism. We present a time-resolved MCD absorption measurement of a thin magnetic Pt/Co/Pt film, showing simultaneous demagnetization of Co and Pt on a femtosecond time scale.

Configuration interaction in charge exchange spectra of tin and xenon

NASA Astrophysics Data System (ADS)

D'Arcy, R.; Morris, O.; Ohashi, H.; Suda, S.; Tanuma, H.; Fujioka, S.; Nishimura, H.; Nishihara, K.; Suzuki, C.; Kato, T.; Koike, F.; O'Sullivan, G.

2011-06-01

Charge-state-specific extreme ultraviolet spectra from both tin ions and xenon ions have been recorded at Tokyo Metropolitan University. The electron cyclotron resonance source spectra were produced from charge exchange collisions between the ions and rare gas target atoms. To identify unknown spectral lines of tin and xenon, atomic structure calculations were performed for Sn14+-Sn17+ and Xe16+-Xe20+ using the Hartree-Fock configuration interaction code of Cowan (1981 The Theory of Atomic Structure and Spectra (Berkeley, CA: University of California Press)). The energies of the capture states involved in the single-electron process that occurs in these slow collisions were estimated using the classical over-barrier model.

Strong Field-Induced Frequency Conversion of Laser Radiation in Plasma Plumes: Recent Achievements

PubMed Central

Ganeev, R. A.

2013-01-01

New findings in plasma harmonics studies using strong laser fields are reviewed. We discuss recent achievements in the growth of the efficiency of coherent extreme ultraviolet (XUV) radiation sources based on frequency conversion of the ultrashort pulses in the laser-produced plasmas, which allowed for the spectral and structural studies of matter through the high-order harmonic generation (HHG) spectroscopy. These studies showed that plasma HHG can open new opportunities in many unexpected areas of laser-matter interaction. Besides being considered as an alternative method for generation of coherent XUV radiation, it can be used as a powerful tool for various spectroscopic and analytical applications. PMID:23864818

Chemistry of the thermosphere and ionosphere

NASA Technical Reports Server (NTRS)

Torr, D. G.; Torr, M. R.

1979-01-01

In the present paper, some of the most important features of the Atmosphere Explorer program, involving studies of the chemistry of the ionosphere and thermosphere, are reviewed. Solar flux and cross sections are tabulated, along with the revised reference spectrum F47113 as compared with the preliminary R74113. The principal results examined include some unexpected variations in the EUV flux and in the response of the thermosphere, revealed by extreme ultraviolet spectrophotometers; discrepancies between the measured and calculated electron flux; recent developments in the detection of nocturnal mid- and low-latitude sources of ionization; and the application of AE satellite data to the study of ionospheric and thermospheric processes, rate coefficients, and atomic and molecular processes.

Anomalously high intercombination line ratios in symbiotic stars - Extreme Bowen pumping?

NASA Technical Reports Server (NTRS)

Kastner, S. O.; Bhatia, A. K.; Feibelman, W. A.

1989-01-01

International Ultraviolet Explorer observations of the ratio of the O III intercombination lines near 1660 A are assembled, showing that the observed ratios in symbiotic stars are significantly higher than the theoretically predicted optically thin limit of 2.5. The presence of an enhancing physical process is thereby indicated. It is suggested that Bowen pumping of the lower level of the 1666.2 A line in an 'external saturation' limit, coupled with appreciable optical depth, could logically explain the high ratios. Some tentative evidence for this is presented and the relevance of far-infrared observations of the O III 51.8 and 88.3 micron lines in symbiotic sources is emphasized.

Research on vacuum utraviolet calibration technology

NASA Astrophysics Data System (ADS)

Wang, Jiapeng; Gao, Shumin; Sun, Hongsheng; Chen, Yinghang; Wei, Jianqiang

2014-11-01

Importance of extreme ultraviolet (EUV) and far ultraviolet (FUV) calibration is growing fast as vacuum ultraviolet payloads are wildly used in national space plan. A calibration device is established especially for the requirement of EUV and FUV metrology and measurement. Spectral radiation and detector relative spectral response at EUV and FUV wavelengths can be calibrated with accuracy of 26% and 20%, respectively. The setup of the device, theoretical model and value retroactive method are introduced and measurement of detector relative spectral response from 30 nm to 200 nm is presented in this paper. The calibration device plays an important role in national space research.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Bierbach, Jana; Yeung, Mark; Eckner, Erich

Surface high-harmonic generation in the relativistic regime is demonstrated as a source of extreme ultra-violet (XUV) pulses with extended operation time. Relativistic high-harmonic generation is driven by a frequency-doubled high-power Ti:Sapphire laser focused to a peak intensity of 3·1019 W/cm2 onto spooling tapes. We demonstrate continuous operation over up to one hour runtime at a repetition rate of 1 Hz. Harmonic spectra ranging from 20 eV to 70 eV (62 nm to 18 nm) were consecutively recorded by an XUV spectrometer. An average XUV pulse energy in the µJ range is measured. With the presented setup, relativistic surface high-harmonic generationmore » becomes a powerful source of coherent XUV pulses that might enable applications in, e.g. attosecond laser physics and the seeding of free-electron lasers, when the laser issues causing 80-% pulse energy fluctuations are overcome.« less

Growth of delta-doped layers on silicon CCD/S for enhanced ultraviolet response

NASA Technical Reports Server (NTRS)

Hoenk, Michael E. (Inventor); Grunthaner, Paula J. (Inventor); Grunthaner, Frank J. (Inventor); Terhune, Robert W. (Inventor); Hecht, Michael H. (Inventor)

1994-01-01

The backside surface potential well of a backside-illuminated CCD is confined to within about half a nanometer of the surface by using molecular beam epitaxy (MBE) to grow a delta-doped silicon layer on the back surface. Delta-doping in an MBE process is achieved by temporarily interrupting the evaporated silicon source during MBE growth without interrupting the evaporated p+ dopant source (e.g., boron). This produces an extremely sharp dopant profile in which the dopant is confined to only a few atomic layers, creating an electric field high enough to confine the backside surface potential well to within half a nanometer of the surface. Because the probability of UV-generated electrons being trapped by such a narrow potential well is low, the internal quantum efficiency of the CCD is nearly 100% throughout the UV wavelength range. Furthermore, the quantum efficiency is quite stable.

Observation and theory of X-ray mirages

PubMed Central

Magnitskiy, Sergey; Nagorskiy, Nikolay; Faenov, Anatoly; Pikuz, Tatiana; Tanaka, Mamoko; Ishino, Masahiko; Nishikino, Masaharu; Fukuda, Yuji; Kando, Masaki; Kawachi, Tetsuya; Kato, Yoshiaki

2013-01-01

The advent of X-ray lasers allowed the realization of compact coherent soft X-ray sources, thus opening the way to a wide range of applications. Here we report the observation of unexpected concentric rings in the far-field beam profile at the output of a two-stage plasma-based X-ray laser, which can be considered as the first manifestation of a mirage phenomenon in X-rays. We have developed a method of solving the Maxwell–Bloch equations for this problem, and find that the experimentally observed phenomenon is due to the emergence of X-ray mirages in the plasma amplifier, appearing as phase-matched coherent virtual point sources. The obtained results bring a new insight into the physical nature of amplification of X-ray radiation in laser-induced plasma amplifiers and open additional opportunities for X-ray plasma diagnostics and extreme ultraviolet lithography. PMID:23733009

Charge state distribution and emission characteristics in a table top reflex discharge - Effect of ion confinement and electrons accelerated across the sheath

DOE PAGES

Kumar, Deepak; Englesbe, Alexander; Parman, Matthew; ...

2015-11-05

Tabletop reflex discharges in a Penning geometry have many applications including ion sources and eXtreme Ultra-Violet (XUV) sources. The presence of primary electrons accelerated across the cathode sheaths is responsible for the distribution of ion charge states and of the unusually high XUV brightness of these plasmas. Absolutely calibrated space resolved XUV spectra from a table top reflex discharge operating with Al cathodes and Ne gas are presented. The spectra are analyzed with a new and complete model for ion charge distribution in similar reflex discharges. The plasma in the discharge was found to have a density of ~10 18mmore » –3 with a significant fraction >0.01 of fast primary electrons. As a result, the implications of the new model on the ion states achievable in a tabletop reflex plasma discharge are also discussed.« less

Observation and theory of X-ray mirages.

PubMed

Magnitskiy, Sergey; Nagorskiy, Nikolay; Faenov, Anatoly; Pikuz, Tatiana; Tanaka, Mamoko; Ishino, Masahiko; Nishikino, Masaharu; Fukuda, Yuji; Kando, Masaki; Kawachi, Tetsuya; Kato, Yoshiaki

2013-01-01

The advent of X-ray lasers allowed the realization of compact coherent soft X-ray sources, thus opening the way to a wide range of applications. Here we report the observation of unexpected concentric rings in the far-field beam profile at the output of a two-stage plasma-based X-ray laser, which can be considered as the first manifestation of a mirage phenomenon in X-rays. We have developed a method of solving the Maxwell-Bloch equations for this problem, and find that the experimentally observed phenomenon is due to the emergence of X-ray mirages in the plasma amplifier, appearing as phase-matched coherent virtual point sources. The obtained results bring a new insight into the physical nature of amplification of X-ray radiation in laser-induced plasma amplifiers and open additional opportunities for X-ray plasma diagnostics and extreme ultraviolet lithography.

Quantification of isomerically summed hydrocarbon contributions to crude oil by carbon number, double bond equivalent, and aromaticity using gas chromatography with tunable vacuum ultraviolet ionization.

PubMed

Nowak, Jeremy A; Weber, Robert J; Goldstein, Allen H

2018-03-12

The ability to structurally characterize and isomerically quantify crude oil hydrocarbons relevant to refined fuels such as motor oil, diesel, and gasoline represents an extreme challenge for chromatographic and mass spectrometric techniques. This work incorporates two-dimensional gas chromatography coupled to a tunable vacuum ultraviolet soft photoionization source, the Chemical Dynamics Beamline 9.0.2 of the Advanced Light Source at the Lawrence Berkeley National Laboratory, with a time-of-flight mass spectrometer (GC × GC-VUV-TOF) to directly characterize and isomerically sum the contributions of aromatic and aliphatic species to hydrocarbon classes of four crude oils. When the VUV beam is tuned to 10.5 ± 0.2 eV, both aromatic and aliphatic crude oil hydrocarbons are ionized to reveal the complete chemical abundance of C 9 -C 30 hydrocarbons. When the VUV beam is tuned to 9.0 ± 0.2 eV only aromatic hydrocarbons are ionized, allowing separation of the aliphatic and aromatic fractions of the crude oil hydrocarbon chemical classes in an efficient manner while maintaining isomeric quantification. This technique provides an effective tool to determine the isomerically summed aromatic and aliphatic hydrocarbon compositions of crude oil, providing information that goes beyond typical GC × GC separations of the most dominant hydrocarbon isomers.

Emission spectra of photoionized plasmas induced by intense EUV pulses: Experimental and theoretical investigations

NASA Astrophysics Data System (ADS)

Saber, Ismail; Bartnik, Andrzej; Skrzeczanowski, Wojciech; Wachulak, Przemysław; Jarocki, Roman; Fiedorowicz, Henryk

2017-03-01

Experimental measurements and numerical modeling of emission spectra in photoionized plasma in the ultraviolet and visible light (UV/Vis) range for noble gases have been investigated. The photoionized plasmas were created using laser-produced plasma (LPP) extreme ultraviolet (EUV) source. The source was based on a gas puff target; irradiated with 10ns/10J/10Hz Nd:YAG laser. The EUV radiation pulses were collected and focused using grazing incidence multifoil EUV collector. The laser pulses were focused on a gas stream, injected into a vacuum chamber synchronously with the EUV pulses. Irradiation of gases resulted in a formation of low temperature photoionized plasmas emitting radiation in the UV/Vis spectral range. Atomic photoionized plasmas produced this way consisted of atomic and ionic with various ionization states. The most dominated observed spectral lines originated from radiative transitions in singly charged ions. To assist in a theoretical interpretation of the measured spectra, an atomic code based on Cowan's programs and a collisional-radiative PrismSPECT code have been used to calculate the theoretical spectra. A comparison of the calculated spectral lines with experimentally obtained results is presented. Electron temperature in plasma is estimated using the Boltzmann plot method, by an assumption that a local thermodynamic equilibrium (LTE) condition in the plasma is validated in the first few ionization states. A brief discussion for the measured and computed spectra is given.

Ultraviolet Views of Enceladus, Tethys, and Dione

NASA Technical Reports Server (NTRS)

Hansen, C. J.; Hendrix, A. R.

2005-01-01

The Cassini Ultraviolet Imaging Spectrograph (UVIS) has collected ultraviolet observations of many of Saturn's icy moons since Cassini's insertion into orbit around Saturn. We will report on results from Enceladus, Tethys and Dione, orbiting in the Saturn system at distances of 3.95, 4.88 and 6.26 Saturn radii, respectively. Icy satellite science objectives of the UVIS include investigations of surface age and evolution, surface composition and chemistry, and tenuous exospheres. We address these objectives by producing albedo maps, and reflection and emission spectra, and observing stellar occultations. UVIS has four channels: EUV: Extreme Ultraviolet (55 nm to 110 nm), FUV: Far Ultraviolet (110 to 190 nm), HSP: High Speed Photometer, and HDAC: Hydrogen-Deuterium Absorption Cell. The EUV and FUV spectrographs image onto a 2-dimensional detector, with 64 spatial rows by 1024 spectral columns. To-date we have focused primarily on the far ultraviolet data acquired with the low resolution slit width (4.8 angstrom spectral resolution). Additional information is included in the original extended abstract.

Experimental observation of attosecond control over relativistic electron bunches with two-colour fields

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yeung, M.; Rykovanov, S.; Bierbach, J.

2016-12-05

Energy coupling during relativistically intense laser–matter interactions is encoded in the attosecond motion of strongly driven electrons at the pre-formed plasma–vacuum boundary. Studying and controlling this motion can reveal details about the microscopic processes that govern a vast array of light–matter interaction phenomena, including those at the forefront of extreme laser–plasma science such as laser-driven ion acceleration, bright attosecond pulse generation and efficient energy coupling for the generation and study of warm dense matter. Here in this paper, we experimentally demonstrate that by precisely adjusting the relative phase of an additional laser beam operating at the second harmonic of themore » driving laser it is possible to control the trajectories of relativistic electron bunches formed during the interaction with a solid target at the attosecond scale. Finally, we observe significant enhancements in the resulting high-harmonic yield, suggesting potential applications for sources of ultra-bright, extreme ultraviolet attosecond radiation to be used in atomic and molecular pump–probe experiments« less

Ultraviolet source for rocket measurements of nitric oxide in the upper atmosphere. [D region

NASA Technical Reports Server (NTRS)

Siddiqui, J. M. H.

1974-01-01

An ultraviolet source suitable for balloon and rocket payloads for measurements of nitric oxide in the lower D-region of the ionosphere was developed. The source primarily emits 1236 A and 1165 A photons obtained from an R.F.-excited krypton discharge in a resonator of coaxial geometry. Ultraviolet flux output greater than 10 to the 14th power photons/sec can be obtained from this source. A systematic design philosophy is developed which enables the photon output to be optimized with respect to photon wavelength, gas pressure, R.F., resonator geometry, and gas to be used. Critical factors in the design are discussed in detail.

Physics of Cool Stars: Densities, Sizes, and Energetics

NASA Technical Reports Server (NTRS)

Dupree, Andrea K.

2001-01-01

The ORFEUS 1 (Orbiting and Retrievable Far and Extreme Ultraviolet Spectrometer) telescope obtained far ultraviolet spectra (lambda-lambda 912-1218) of luminous cool stars as a part of our observing program. Two classes of objects were measured: luminous single stars beta Dra (HD 159181) and two hybrid stars alpha Aqr (HD 209750) and alpha TrA (HD 150798) and two active binary systems: 44i Boo and UX Ari.

Skylab

NASA Image and Video Library

1971-04-01

This photograph shows Skylab's Extreme Ultraviolet (XUV) Spectroheliograph during an acceptance test and checkout procedures in April 1971. The unit was an Apollo Telescope Mount (ATM) instrument designed to sequentially photograph the solar chromosphere and corona in selected ultraviolet wavelengths. The instrument also obtained information about composition, temperature, energy conversion and transfer, and plasma processes of the chromosphere and lower corona. The Marshall Space Flight Center had program management responsibility for the development of Skylab hardware and experiments.

Coherent Extreme Ultraviolet Generation and Surface Studies Using Ultraviolet Excimer Lasers.

DTIC Science & Technology

1986-02-10

of Outer-Shell Electrons" 7. "A Theoretical Model of Inner-Shell ......................... 30 A Excitation by Outer-Snell Electrons" E. "Anomalous...rays are feasible. Our work involves a program of activities, involving both experimental and theoretical components, to explore the physical... theoretical effort con- centrating on the character of high order multiquantum coupling in the inten- sity regime above 1017 WcM2 . In addition

Ultraviolet Light Curves of Gaia16apd in Superluminous Supernova Models

NASA Astrophysics Data System (ADS)

Tolstov, Alexey; Zhiglo, Andrey; Nomoto, Ken'ichi; Sorokina, Elena; Kozyreva, Alexandra; Blinnikov, Sergei

2017-08-01

Observations of Gaia16apd revealed extremely luminous ultraviolet emission among superluminous supernovae (SLSNe). Using radiation hydrodynamics simulations, we perform a comparison of UV light curves, color temperatures, and photospheric velocities between the most popular SLSN models: pair-instability supernova, magnetar, and interaction with circumstellar medium. We find that the interaction model is the most promising to explain the extreme UV luminosity of Gaia16apd. The differences in late-time UV emission and in color evolution found between the models can be used to link an observed SLSN event to the most appropriate model. Observations at UV wavelengths can be used to clarify the nature of SLSNe and more attention should be paid to them in future follow-up observations.

Plasma-assisted oxide removal from ruthenium-coated EUV optics

NASA Astrophysics Data System (ADS)

Dolgov, A.; Lee, C. J.; Bijkerk, F.; Abrikosov, A.; Krivtsun, V. M.; Lopaev, D.; Yakushev, O.; van Kampen, M.

2018-04-01

An experimental study of oxide reduction at the surface of ruthenium layers on top of multilayer mirrors and thin Ru/Si films is presented. Oxidation and reduction processes were observed under conditions close to those relevant for extreme ultraviolet lithography. The oxidized ruthenium surface was exposed to a low-temperature hydrogen plasma, similar to the plasma induced by extreme ultraviolet radiation. The experiments show that hydrogen ions are the main reducing agent. Furthermore, the addition of hydrogen radicals increases the reduction rate beyond that expected from simple flux calculations. We show that low-temperature hydrogen plasmas can be effective for reducing oxidized top surfaces. Our proof-of-concept experiments show that an in situ, EUV-generated plasma cleaning technology is feasible.

Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions

NASA Astrophysics Data System (ADS)

Barte, Ellie Floyd; Hara, Hiroyuki; Tamura, Toshiki; Gisuji, Takuya; Chen, When-Bo; Lokasani, Ragava; Hatano, Tadashi; Ejima, Takeo; Jiang, Weihua; Suzuki, Chihiro; Li, Bowen; Dunne, Padraig; O'Sullivan, Gerry; Sasaki, Akira; Higashiguchi, Takeshi; Limpouch, Jiří

2018-05-01

We have characterized the soft x-ray and extreme ultraviolet (XUV) emission of rhodium (Rh) plasmas produced using dual pulse irradiation by 150-ps or 6-ns pre-pulses, followed by a 150-ps main pulse. We have studied the emission enhancement dependence on the inter-pulse time separation and found it to be very significant for time separations less than 10 ns between the two laser pulses when using 6-ns pre-pulses. The behavior using a 150-ps pre-pulse was consistent with such plasmas displaying only weak self-absorption effects in the expanding plasma. The results demonstrate the advantage of using dual pulse irradiation to produce the brighter plasmas required for XUV applications.

Science & Technology Review September/October 2008

DOE Office of Scientific and Technical Information (OSTI.GOV)

Bearinger, J P

2008-07-21

This issue has the following articles: (1) Answering Scientists Most Audacious Questions--Commentary by Dona Crawford; (2) Testing the Accuracy of the Supernova Yardstick--High-resolution simulations are advancing understanding of Type Ia supernovae to help uncover the mysteries of dark energy; (3) Developing New Drugs and Personalized Medical Treatment--Accelerator mass spectrometry is emerging as an essential tool for assessing the effects of drugs in humans; (4) Triage in a Patch--A painless skin patch and accompanying detector can quickly indicate human exposure to biological pathogens, chemicals, explosives, or radiation; and (5) Smoothing Out Defects for Extreme Ultraviolet Lithography--A process for smoothing mask defectsmore » helps move extreme ultraviolet lithography one step closer to creating smaller, more powerful computer chips.« less

Study of an astronomical extreme ultraviolet rocket spectrometer for use on shuttle missions

NASA Technical Reports Server (NTRS)

Bowyer, C. S.

1977-01-01

The adaptation of an extreme ultraviolet astronomy rocket payload for flight on the shuttle was studied. A sample payload for determining integration and flight procedures for experiments which may typically be flown on shuttle missions was provided. The electrical, mechanical, thermal, and operational interface requirements between the payload and the orbiter were examined. Of particular concern was establishing a baseline payload accommodation which utilizes proven common hardware for electrical, data, command, and possibly real time monitoring functions. The instrument integration and checkout procedures necessary to assure satisfactory in-orbit instrument performance were defined and those procedures which can be implemented in such a way as to minimize their impact on orbiter integration schedules were identified.

Far-infrared-light shadowgraphy for high extraction efficiency of extreme ultraviolet light from a CO2-laser-generated tin plasma

NASA Astrophysics Data System (ADS)

Matsukuma, Hiraku; Hosoda, Tatsuya; Suzuki, Yosuke; Yogo, Akifumi; Yanagida, Tatsuya; Kodama, Takeshi; Nishimura, Hiroaki

2016-08-01

The two-color, double-pulse method is an efficient scheme to generate extreme ultraviolet light for fabricating the next generation semiconductor microchips. In this method, a Nd:YAG laser pulse is used to expand a several-tens-of-micrometers-scale tin droplet, and a CO2 laser pulse is subsequently directed at the expanded tin vapor after an appropriate delay time. We propose the use of shadowgraphy with a CO2 laser probe-pulse scheme to optimize the CO2 main-drive laser. The distribution of absorption coefficients is derived from the experiment, and the results are converted to a practical absorption rate for the CO2 main-drive laser.

Correlated proton-electron hole dynamics in protonated water clusters upon extreme ultraviolet photoionization

DOE Office of Scientific and Technical Information (OSTI.GOV)

Li, Zheng; Vendrell, Oriol

2016-01-13

The ultrafast nuclear and electronic dynamics of protonated water clusters H+(H2O)n after extreme ultraviolet photoionization is investigated. In particular, we focus on cluster cations with n = 3, 6, and 21. Upon ionization, two positive charges are present in the cluster related to the excess proton and the missing electron, respectively. A correlation is found between the cluster's geometrical conformation and initial electronic energy with the size of the final fragments produced. As a result, for situations in which the electron hole and proton are initially spatially close, the two entities become correlated and separate in a time-scale of 20more » to 40 fs driven by strong non-adiabatic effects.« less

Results of the AEROS satellite program: Summary

NASA Technical Reports Server (NTRS)

Lammerzahl, P.; Rawer, K.; Roemer, N.

1980-01-01

Published literature reporting aeronomic data collected on two AEROS missions is summarized. The extreme ultraviolet solar radiation and other significant parameters of the thermosphere/ionosphere were investigated. Kinetic pressure, the quantity of atomic nitrogen, and partial densities of helium, oxygen, nitrogen, argon, and atomic nitrogen were determined. The thermal electron population, superthermal energy distribution, plasma density, ion temperature, and composition according to ion types were measured. The chief energy supply in the thermosphere was calculated. Aeronomic calculations showing that variations in the parameters of the ionosphere cannot be correlated with fluctuations of extreme ultraviolet solar radiation were performed. The AEROS data were compared with data from S3-1, ISIS, and AE-C satellites. Models of the thermosphere and ionosphere were developed.

Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA's Solar Dynamics Observatory.

PubMed

Soufli, Regina; Baker, Sherry L; Windt, David L; Gullikson, Eric M; Robinson, Jeff C; Podgorski, William A; Golub, Leon

2007-06-01

The high-spatial frequency roughness of a mirror operating at extreme ultraviolet (EUV) wavelengths is crucial for the reflective performance and is subject to very stringent specifications. To understand and predict mirror performance, precision metrology is required for measuring the surface roughness. Zerodur mirror substrates made by two different polishing vendors for a suite of EUV telescopes for solar physics were characterized by atomic force microscopy (AFM). The AFM measurements revealed features in the topography of each substrate that are associated with specific polishing techniques. Theoretical predictions of the mirror performance based on the AFM-measured high-spatial-frequency roughness are in good agreement with EUV reflectance measurements of the mirrors after multilayer coating.

Spectroscopy of Highly Charged Tin Ions for AN Extreme Ultraviolet Light Source for Lithography

NASA Astrophysics Data System (ADS)

Torretti, Francesco; Windberger, Alexander; Ubachs, Wim; Hoekstra, Ronnie; Versolato, Oscar; Ryabtsev, Alexander; Borschevsky, Anastasia; Berengut, Julian; Crespo Lopez-Urrutia, Jose

2017-06-01

Laser-produced tin plasmas are the prime candidates for the generation of extreme ultraviolet (EUV) light around 13.5 nm in nanolithographic applications. This light is generated primarily by atomic transitions in highly charged tin ions: Sn^{8+}-Sn^{14+}. Due to the electronic configurations of these charge states, thousands of atomic lines emit around 13.5 nm, clustered in a so-called unresolved transition array. As a result, accurate line identification becomes difficult in this regime. Nevertheless, this issue can be circumvented if one turns to the optical: with far fewer atomic states, only tens of transitions take place and the spectra can be resolved with far more ease. We have investigated optical emission lines in an electron-beam-ion-trap (EBIT), where we managed to charge-state resolve the spectra. Based on this technique and on a number of different ab initio techniques for calculating the level structure, the optical spectra could be assigned [1,2]. As a conclusion the assignments of EUV transitions in the literature require corrections. The EUV and optical spectra are measured simultaneously in the controlled conditions of the EBIT as well as in a droplet-based laser-produced plasma source providing information on the contribution of Sn^{q+} charge states to the EUV emission. [1] A. Windberger, F. Torretti, A. Borschevsky, A. Ryabtsev, S. Dobrodey, H. Bekker, E. Eliav, U. Kaldor, W. Ubachs, R. Hoekstra, J.R. Crespo Lopez-Urrutia, O.O. Versolato, Analysis of the fine structure of Sn^{11+} - Sn^{14+} ions by optical spectroscopy in an electron beam ion trap, Phys. Rev. A 94, 012506 (2016). [2] F. Torretti, A. Windberger, A. Ryabtsev, S. Dobrodey, H. Bekker, W. Ubachs, R. Hoekstra, E.V. Kahl, J.C. Berengut, J.R. Crespo Lopez-Urrutia, O.O. Versolato, Optical spectroscopy of complex open 4d-shell ions Sn^{7+} - Sn^{10+}, arXiv:1612.00747

Mask fabrication and its applications to extreme ultra-violet diffractive optics

NASA Astrophysics Data System (ADS)

Cheng, Yang-Chun

Short-wavelength radiation around 13nm of wavelength (Extreme Ultra-Violet, EUV) is being considered for patterning microcircuits, and other electronic chips with dimensions in the nanometer range. Interferometric Lithography (IL) uses two beams of radiation to form high-resolution interference fringes, as small as half the wavelength of the radiation used. As a preliminary step toward manufacturing technology, IL can be used to study the imaging properties of materials in a wide spectral range and at nanoscale dimensions. A simple implementation of IL uses two transmission diffraction gratings to form the interference pattern. More complex interference patterns can be created by using different types of transmission gratings. In this thesis, I describe the development of a EUV lithography system that uses diffractive optical elements (DOEs), from simple gratings to holographic structures. The exposure system is setup on a EUV undulator beamline at the Synchrotron Radiation Center, in the Center for NanoTechnology clean room. The setup of the EUV exposure system is relatively simple, while the design and fabrication of the DOE "mask" is complex, and relies on advanced nanofabrication techniques. The EUV interferometric lithography provides reliable EUV exposures of line/space patterns and is ideal for the development of EUV resist technology. In this thesis I explore the fabrication of these DOE for the EUV range, and discuss the processes I have developed for the fabrication of ultra-thin membranes. In addition, I discuss EUV holographic lithography and generalized Talbot imaging techniques to extend the capability of our EUV-IL system to pattern arbitrary shapes, using more coherent sources than the undulator. In a series of experiments, we have demonstrated the use of a soft X-ray (EUV) laser as effective source for EUV lithography. EUV-IL, as implemented at CNTech, is being used by several companies and research organizations to characterize photoresist materials.

The development of a tunable, single-frequency ultraviolet laser source for UV filtered Rayleigh scattering

NASA Technical Reports Server (NTRS)

Finkelstein, N.; Gambogi, J.; Lempert, Walter R.; Miles, Richard B.; Rines, G. A.; Finch, A.; Schwarz, R. A.

1995-01-01

We present the development of a flexible, high power, narrow line width, tunable ultraviolet source for diagnostic application. By frequency tripling the output of a pulsed titanium-sapphire laser, we achieve broadly tunable (227-360 nm) ultraviolet light with high quality spatial and spectral resolution. We also present the characterization of a mercury vapor cell which provides a narrow band, sharp edge absorption filter at 253.7 nm. These two components form the basis for the extension of the Filtered Rayleigh Scattering technique into the ultraviolet. The UV-FRS system is comprised of four pieces: a single frequency, cw tunable Ti:Sapphire seeding source; a high-powered pulsed Ti:Sapphire oscillator; a third harmonic generator system; and an atomic mercury vapor filter. In this paper we discuss the development and characterization of each of these elements.

Ultraviolet spectrophotometry of three LINERs

NASA Technical Reports Server (NTRS)

Goodrich, R. W.; Keel, W. C.

1986-01-01

Three galaxies known to be LINERs were observed spectroscopically in the ultraviolet in an attempt to detect the presumed nonthermal continuum source thought to be the source of photoionization in the nuclei. NGC 4501 was found to be too faint for study with the IUE spectrographs, while NGC 5005 had an extended ultraviolet light profile. Comparison with the optical light profile of NGC 5005 indicates that the ultraviolet source is distributed spatially in the same manner as the optical starlight, probably indicating that the ultraviolet excess is due to a component of hot stars in the nucleus. These stars contribute detectable absorption features longward of 2500 A; together with optical data, the IUE spectra suggest a burst of star formation about 1 billion yr ago, with a lower rate continuing to produce a few OB stars. In NGC 4579, a point source contributing most of the ultraviolet excess is found that is much different than the optical light distribution. Furthermore, the ultraviolet to X-ray spectral index in NGC 4579 is 1.4, compatible with the UV to X-ray indices found for samples of Seyfert galaxies. This provides compelling evidence for the detection of the photoionizing continuum in NGC 4579 and draws the research fields of normal galaxies and active galactic nuclei closer together. The emission-line spectrum of NGC 4579 is compared with calculations from a photoionization code, CLOUDY, and several shock models. The photoionization code is found to give superior results, adding to the increasing weight of evidence that the LINER phenomenon is essentially a scaled-down version of the Seyfert phenomenon.

Synthesis and characterization of attosecond light vortices in the extreme ultraviolet

PubMed Central

Géneaux, R.; Camper, A.; Auguste, T.; Gobert, O.; Caillat, J.; Taïeb, R.; Ruchon, T.

2016-01-01

Infrared and visible light beams carrying orbital angular momentum (OAM) are currently thoroughly studied for their extremely broad applicative prospects, among which are quantum information, micromachining and diagnostic tools. Here we extend these prospects, presenting a comprehensive study for the synthesis and full characterization of optical vortices carrying OAM in the extreme ultraviolet (XUV) domain. We confirm the upconversion rules of a femtosecond infrared helically phased beam into its high-order harmonics, showing that each harmonic order carries the total number of OAM units absorbed in the process up to very high orders (57). This allows us to synthesize and characterize helically shaped XUV trains of attosecond pulses. To demonstrate a typical use of these new XUV light beams, we show our ability to generate and control, through photoionization, attosecond electron beams carrying OAM. These breakthroughs pave the route for the study of a series of fundamental phenomena and the development of new ultrafast diagnosis tools using either photonic or electronic vortices. PMID:27573787

Synthesis and characterization of attosecond light vortices in the extreme ultraviolet

DOE PAGES

Géneaux, R.; Camper, A.; Auguste, T.; ...

2016-08-30

Infrared and visible light beams carrying orbital angular momentum (OAM) are currently thoroughly studied for their extremely broad applicative prospects, among which are quantum information, micromachining and diagnostic tools. Here we extend these prospects, presenting a comprehensive study for the synthesis and full characterization of optical vortices carrying OAM in the extreme ultraviolet (XUV) domain. We confirm the upconversion rules of a femtosecond infrared helically phased beam into its high-order harmonics, showing that each harmonic order carries the total number of OAM units absorbed in the process up to very high orders (57). This allows us to synthesize and characterizemore » helically shaped XUV trains of attosecond pulses. To demonstrate a typical use of these new XUV light beams, we show our ability to generate and control, through photoionization, attosecond electron beams carrying OAM. Furthermore, these breakthroughs pave the route for the study of a series of fundamental phenomena and the development of new ultrafast diagnosis tools using either photonic or electronic vortices.« less

A Room Temperature Low-Threshold Ultraviolet Plasmonic Nanolaser

DTIC Science & Technology

2014-09-23

Here we demonstrate the first strong room temperature ultraviolet (B370 nm) SP polariton laser with an extremely low threshold (B3.5MWcm 2). We find...localized surface plasmon and propagating surface plasmon polariton (SPP), has been demonstrated in metal nanosphere cavities6, metal-cladding...Quantum plasmonics. Nat. Phys. 9, 329–340 (2013). 4. Berini, P. & De Leon, I. Surface plasmon- polariton amplifiers and lasers. Nat. Photon. 6, 16–24 (2012

Fast temporal correlation between hard X-ray and ultraviolet continuum brightenings

NASA Technical Reports Server (NTRS)

Machado, Marcos E.; Mauas, Pablo J.

1986-01-01

Recent Solar Maximum Mission (SMM) observations have shown fast and simultaneous increases in hard X-rays (HXR, E25 keV) and ultraviolet continuum (UVC, lambda lambda approx. equals 1600 and 1388 A) radiation. A simple and natural explanation is given for this phenomenon to happen, which does not involve extreme conditions for energy transport processes, and confirms earlier results on the effect of XUV photoionization in the solar atmosphere.

ANS ultraviolet observations of dwarf Cepheids

NASA Astrophysics Data System (ADS)

Sturch, C. R.; Wu, C.-C.

1983-03-01

Ultraviolet observations of three dwarf Cepheids (VZ Cnc, SX Phe, and AI Vel) are presented. The UV light curves are consistent with those in the visual region. When compared to standard stars, all three dwarf Cepheids exhibit flux deficiencies at the shortest observed wavelengths. The most extreme deficiencies appear for SX Phe; these may be related to the other properties previously noted for this star, including low metallicity, high space motion, and low luminosity.

Life Beyond the Planet of Origin and Implications for the Search for Life on Mars

NASA Technical Reports Server (NTRS)

Mancinelli, Rocco L.

2015-01-01

Outer space is vast, cold, devoid of matter, radiation filled with essentially no gravity. These factors present an environmental challenge for any form of life. Earth's biosphere has evolved for more than 3 billion years shielded from the hostile environment of outer space by the protective blanket of the atmosphere and magnetosphere. Space is a nutritional wasteland with no liquid water and readily available organic carbon. Moving beyond a life's planet of origin requires a means for transport, the ability to withstand transport, and the ability to colonize, thrive and ultimately evolve in the new environment. Can life survive beyond its home planet? The key to answering this question is to identify organisms that first have the ability to withstand space radiation, space vacuum desiccation and time in transit, and second the ability to grow in an alien environment. Within the last 60 years space technology allowed us to transport life beyond Earth's protective shield so we may study, in situ, their responses to selected conditions of space. To date a variety of microbes ranging from viruses, to Bacteria, to Archaea, to Eukarya have been tested in the space environment. Most died instantly, but not all. These studies revealed that ultraviolet radiation is the near-term lethal agent, while hard radiation is the long-term lethal agent when the organism is shielded from ultraviolet radiation. In fact, bacterial spores, halophilic cyanobacteria and Archaea as well as some lichens survive very well if protected from ultraviolet radiation [1]. Some microbes, then, may be able to survive the trip in outer space to Mars on a spacecraft or in a meteorite. Once on Mars can a terrestrial microbe survive? Although the conditions on Mars are not as harsh as those in space, they are not hospitable for a terrestrial microbe. Studies, however, have shown that certain microbes that can survive in space for several years may also be able to survive on Mars if protected from ultraviolet radiation [1]. Laboratory simulation experiments using a mock-up of the Phoenix lander have shown that microbes transported to the surface of Mars on a spacecraft come off the spacecraft and mix into the Martian regolith [2]. Additionally, studies simulating Martian dust storms demonstrate that microbes can survive in the Martian wind blown dust and be scattered across the Martian surface away from the spacecraft. Would these microbes that may survive on Mars metabolize and propagate? Growth requires liquid water, a carbon source and an energy source. Survival on Mars also requires protection from ultraviolet radiation. In the cold, dry environment of Mars the probability of microbial metabolism and growth at or just beneath the surface is extremely low. Although the probability is low, Mars may be contaminated with potentially live terrestrial organisms. In light of that statistic we must be extremely diligent and cautious in our search for Martian life. If we are not cautious we may find life on Mars and it may be a contaminant from Earth.

Ultraviolet, Optical and near-infrared photometric follow up of the transient source Fermi J1654-1055 with GROND and Swift-UVOT

NASA Astrophysics Data System (ADS)

Kaur, A.; Bolmer, J.; Greiner, J.; Rau, A.; Schady, P.; Ajello, M.; Hartmann, D. H.

2016-02-01

Ultraviolet, Optical and near-infrared photometric follow up of the transient source Fermi J1654-1055 with GROND and Swift-UVOT A. Kaur (Clemson University), J. Bolmer, J. Greiner, A. Rau, P. Schady (all MPE, Garching), M. Ajello, D. H. Hartmann (Clemson University) We report the ultraviolet, optical and near IR photometric observations of the new gamma-ray source Fermi J1654-1055/PMN J1632-1052 (RA = 248.20900 deg and Dec = -10.87578 deg) detected by Fermi during the week of February 08 and 15, 2016 (see ATel #8721).

X-ray and extreme ultraviolet spectroscopy on DIII-D

DOE Office of Scientific and Technical Information (OSTI.GOV)

Victor, Brian S.; Allen, Steve L.; Beiersdorfer, P.

Two spectrometers were installed to measure tungsten emission in the core of DIII-D plasmas during a metal rings experimental campaign. The spectral range of the high-resolution (1340 spectral channels), variable-ruled grating X-ray and Extreme Ultraviolet Spectrometer (XEUS) extends from10–71more » $$\\dot{A}$$ . The spectral range of the second spectrometer, the Long-Wavelength Extreme Ultraviolet Spectrometer (LoWEUS), measures between 31–174$$\\dot{A}$$ . Three groups of tungsten lines were identified with XEUS: W 38+-W 45+ from 47–63$$\\dot{A}$$ , W 27+-W 35+ from 45–55$$\\dot{A}$$ , and W 28+-W 33+ from 16–30$$\\dot{A}$$ . Emission lines from tungsten charge states W 28+, W 43+, W 44+, and W 45+ are identified and the line amplitude is presented versus time. Peak emission of W 43+-W 45+ occurs between core Te=2.5-3 keV, and peak emission of W28+ occurs at core Te 1:3 keV. One group of tungsten lines, W 40+-W 45+, between 120–140$$\\dot{A}$$ , was identified with LoWEUS. W 43+- W 45+ lines measured with LoWEUS track the sawtooth cycle. Furthermore, sensitivity to the sawtooth cycle and the correlation of the peak emission with core electron temperature show that these spectrometers track the on-axis tungsten emission of DIII-D plasmas.« less

A Change in the Solar He II EUV Global Network Structure as an Indicator of the Geo-Effectiveness of Solar Minima

NASA Technical Reports Server (NTRS)

Didkovsky, L.; Gurman, J. B.

2013-01-01

Solar activity during 2007 - 2009 was very low, causing anomalously low thermospheric density. A comparison of solar extreme ultraviolet (EUV) irradiance in the He II spectral band (26 to 34 nm) from the Solar Extreme ultraviolet Monitor (SEM), one of instruments on the Charge Element and Isotope Analysis System (CELIAS) on board the Solar and Heliospheric Observatory (SOHO) for the two latest solar minima showed a decrease of the absolute irradiance of about 15 +/- 6 % during the solar minimum between Cycles 23 and 24 compared with the Cycle 22/23 minimum when a yearly running-mean filter was used. We found that some local, shorter-term minima including those with the same absolute EUV flux in the SEM spectral band show a higher concentration of spatial power in the global network structure from the 30.4 nm SOHO/Extreme ultraviolet Imaging Telescope (EIT) images for the local minimum of 1996 compared with the minima of 2008 - 2011.We interpret this higher concentration of spatial power in the transition region's global network structure as a larger number of larger-area features on the solar disk. These changes in the global network structure during solar minima may characterize, in part, the geo-effectiveness of the solar He II EUV irradiance in addition to the estimations based on its absolute levels.

Extreme ultraviolet spectra of Venusian airglow observed by EXCEED

NASA Astrophysics Data System (ADS)

Nara, Yusuke; Yoshikawa, Ichiro; Yoshioka, Kazuo; Murakami, Go; Kimura, Tomoki; Yamazaki, Atsushi; Tsuchiya, Fuminori; Kuwabara, Masaki; Iwagami, Naomoto

2018-06-01

Extreme ultraviolet (EUV) spectra of Venus in the wavelength range 520 - 1480 Å with 3 - 4 Å resolutions were obtained in March 2014 by an EUV imaging spectrometer EXCEED (Extreme Ultraviolet Spectroscope for Exospheric Dynamics) on the HISAKI spacecraft. Due to its high sensitivity and long exposure time, many new emission lines and bands were identified. Already known emissions such as the O II 834 Å, O I 989 Å, H ILy - β 1026 Å, and the C I 1277 Å lines (Broadfoot et al., 1974; Bertaux et al., 1980; Feldman et al., 2000) are also detected in the EXCEED spectrum. In addition, N2 band systems such as the Lyman-Birge-Hopfield (a 1Πg - X 1Σg+) (2, 0), (2, 1), (3, 1), (3, 2) and (5, 3) bands, the Birge-Hopfield (b1Πu - X 1 Σg+) (1, 3) band, and the Carroll-Yoshino (c 4‧ 1 Σu+ - X 1Σg+) (0, 0) and (0, 1) bands together are identified for the first time in the Venusian airglow. We also identified the CO Hopfield-Birge (B 1Σ+ - X 1Σ+) (1, 0) band in addition to the already known (0, 0) band, and the CO Hopfield-Birge (C 1Σ+ - X 1Σ+) (0, 1), (0, 2) bands in addition to the already known (0, 0) band (Feldman et al., 2000; Gérard et al., 2011).

CAN A NANOFLARE MODEL OF EXTREME-ULTRAVIOLET IRRADIANCES DESCRIBE THE HEATING OF THE SOLAR CORONA?

DOE Office of Scientific and Technical Information (OSTI.GOV)

Tajfirouze, E.; Safari, H.

2012-01-10

Nanoflares, the basic units of impulsive energy release, may produce much of the solar background emission. Extrapolation of the energy frequency distribution of observed microflares, which follows a power law to lower energies, can give an estimation of the importance of nanoflares for heating the solar corona. If the power-law index is greater than 2, then the nanoflare contribution is dominant. We model a time series of extreme-ultraviolet emission radiance as random flares with a power-law exponent of the flare event distribution. The model is based on three key parameters: the flare rate, the flare duration, and the power-law exponentmore » of the flare intensity frequency distribution. We use this model to simulate emission line radiance detected in 171 A, observed by Solar Terrestrial Relation Observatory/Extreme-Ultraviolet Imager and Solar Dynamics Observatory/Atmospheric Imaging Assembly. The observed light curves are matched with simulated light curves using an Artificial Neural Network, and the parameter values are determined across the active region, quiet Sun, and coronal hole. The damping rate of nanoflares is compared with the radiative losses cooling time. The effect of background emission, data cadence, and network sensitivity on the key parameters of the model is studied. Most of the observed light curves have a power-law exponent, {alpha}, greater than the critical value 2. At these sites, nanoflare heating could be significant.« less

X-ray and extreme ultraviolet spectroscopy on DIII-D

DOE PAGES

Victor, Brian S.; Allen, Steve L.; Beiersdorfer, P.; ...

2017-06-14

Two spectrometers were installed to measure tungsten emission in the core of DIII-D plasmas during a metal rings experimental campaign. The spectral range of the high-resolution (1340 spectral channels), variable-ruled grating X-ray and Extreme Ultraviolet Spectrometer (XEUS) extends from10–71more » $$\\dot{A}$$ . The spectral range of the second spectrometer, the Long-Wavelength Extreme Ultraviolet Spectrometer (LoWEUS), measures between 31–174$$\\dot{A}$$ . Three groups of tungsten lines were identified with XEUS: W 38+-W 45+ from 47–63$$\\dot{A}$$ , W 27+-W 35+ from 45–55$$\\dot{A}$$ , and W 28+-W 33+ from 16–30$$\\dot{A}$$ . Emission lines from tungsten charge states W 28+, W 43+, W 44+, and W 45+ are identified and the line amplitude is presented versus time. Peak emission of W 43+-W 45+ occurs between core Te=2.5-3 keV, and peak emission of W28+ occurs at core Te 1:3 keV. One group of tungsten lines, W 40+-W 45+, between 120–140$$\\dot{A}$$ , was identified with LoWEUS. W 43+- W 45+ lines measured with LoWEUS track the sawtooth cycle. Furthermore, sensitivity to the sawtooth cycle and the correlation of the peak emission with core electron temperature show that these spectrometers track the on-axis tungsten emission of DIII-D plasmas.« less

Method for high-precision multi-layered thin film deposition for deep and extreme ultraviolet mirrors

DOEpatents

Ruffner, J.A.

1999-06-15

A method for coating (flat or non-flat) optical substrates with high-reflectivity multi-layer coatings for use at Deep Ultra-Violet (DUV) and Extreme Ultra-Violet (EUV) wavelengths. The method results in a product with minimum feature sizes of less than 0.10 [micro]m for the shortest wavelength (13.4 nm). The present invention employs a computer-based modeling and deposition method to enable lateral and vertical thickness control by scanning the position of the substrate with respect to the sputter target during deposition. The thickness profile of the sputter targets is modeled before deposition and then an appropriate scanning algorithm is implemented to produce any desired, radially-symmetric thickness profile. The present invention offers the ability to predict and achieve a wide range of thickness profiles on flat or figured substrates, i.e., account for 1/R[sup 2] factor in a model, and the ability to predict and accommodate changes in deposition rate as a result of plasma geometry, i.e., over figured substrates. 15 figs.

Extreme ultraviolet explorer satellite observation of Jupiter's Io plasma torus

NASA Technical Reports Server (NTRS)

Hall, D. T; Gladstone, G. R.; Moos, H. W.; Bagenal, F.; Clarke, J. T.; Feldman, P. D.; Mcgrath, M. A.; Schneider, N. M.; Shemansky, D. E.; Strobel, D. F.

1994-01-01

We present the first Extreme Ultraviolet Explorer (EUVE) satellite observation of the Jupiter system, obtained during the 2 day period 1993 March 30 through April 1, which shows a rich emission-line spectrum from the Io plasma torus spanning wavelengths 370 to 735 A. The emission features correspond primarily to known multiplets of oxygen and sulfur ions, but a blended feature near 372 A is a plausible Na II transition. The summed detected energy flux of (7.2 +/- 0.2) x 10(exp -11) ergs/sq cm(s) corresponds to a radiated power of approximately equal to 4 x 10(exp 11) W in this spectral range. All ansa emissions show a distinct dawn-dusk brightness asymmetry and the measured dusk/dawn ratio of the bright S III lambda-680 feature is 2.3 +/- 0.3, significantly larger than the ratio measured by the Voyager spacecraft ultraviolet (UV) instruments. A preliminary estimate of ion partitioning indicates that the oxygen/sulfur ion ratio is approximately equal to 2, compared to the value approximately equal to 1.3 measured by Voyager, and that (Na(+))/(e) greater than 0.01.

Non-Gaussian Velocity Distributions in Solar Flares from Extreme Ultraviolet Lines: A Possible Diagnostic of Ion Acceleration

NASA Astrophysics Data System (ADS)

Jeffrey, Natasha L. S.; Fletcher, Lyndsay; Labrosse, Nicolas

2017-02-01

In a solar flare, a large fraction of the magnetic energy released is converted rapidly to the kinetic energy of non-thermal particles and bulk plasma motion. This will likely result in non-equilibrium particle distributions and turbulent plasma conditions. We investigate this by analyzing the profiles of high temperature extreme ultraviolet emission lines from a major flare (SOL2014-03-29T17:44) observed by the EUV Imaging Spectrometer (EIS) on Hinode. We find that in many locations the line profiles are non-Gaussian, consistent with a kappa distribution of emitting ions with properties that vary in space and time. At the flare footpoints, close to sites of hard X-ray emission from non-thermal electrons, the κ index for the Fe xvi 262.976 Å line at 3 MK takes values of 3-5. In the corona, close to a low-energy HXR source, the Fe xxiii 263.760 Å line at 15 MK shows κ values of typically 4-7. The observed trends in the κ parameter show that we are most likely detecting the properties of the ion population rather than any instrumental effects. We calculate that a non-thermal ion population could exist if locally accelerated on timescales ≤0.1 s. However, observations of net redshifts in the lines also imply the presence of plasma downflows, which could lead to bulk turbulence, with increased non-Gaussianity in cooler regions. Both interpretations have important implications for theories of solar flare particle acceleration.

Non-Gaussian Velocity Distributions in Solar Flares from Extreme Ultraviolet Lines: A Possible Diagnostic of Ion Acceleration

DOE Office of Scientific and Technical Information (OSTI.GOV)

Jeffrey, Natasha L. S.; Fletcher, Lyndsay; Labrosse, Nicolas

2017-02-10

In a solar flare, a large fraction of the magnetic energy released is converted rapidly to the kinetic energy of non-thermal particles and bulk plasma motion. This will likely result in non-equilibrium particle distributions and turbulent plasma conditions. We investigate this by analyzing the profiles of high temperature extreme ultraviolet emission lines from a major flare (SOL2014-03-29T17:44) observed by the EUV Imaging Spectrometer (EIS) on Hinode . We find that in many locations the line profiles are non-Gaussian, consistent with a kappa distribution of emitting ions with properties that vary in space and time. At the flare footpoints, close tomore » sites of hard X-ray emission from non-thermal electrons, the κ index for the Fe xvi 262.976 Å line at 3 MK takes values of 3–5. In the corona, close to a low-energy HXR source, the Fe xxiii 263.760 Å line at 15 MK shows κ values of typically 4–7. The observed trends in the κ parameter show that we are most likely detecting the properties of the ion population rather than any instrumental effects. We calculate that a non-thermal ion population could exist if locally accelerated on timescales ≤0.1 s. However, observations of net redshifts in the lines also imply the presence of plasma downflows, which could lead to bulk turbulence, with increased non-Gaussianity in cooler regions. Both interpretations have important implications for theories of solar flare particle acceleration.« less

Production of EUV mask blanks with low killer defects

NASA Astrophysics Data System (ADS)

Antohe, Alin O.; Kearney, Patrick; Godwin, Milton; He, Long; John Kadaksham, Arun; Goodwin, Frank; Weaver, Al; Hayes, Alan; Trigg, Steve

2014-04-01

For full commercialization, extreme ultraviolet lithography (EUVL) technology requires the availability of EUV mask blanks that are free of defects. This remains one of the main impediments to the implementation of EUV at the 22 nm node and beyond. Consensus is building that a few small defects can be mitigated during mask patterning, but defects over 100 nm (SiO2 equivalent) in size are considered potential "killer" defects or defects large enough that the mask blank would not be usable. The current defect performance of the ion beam sputter deposition (IBD) tool will be discussed and the progress achieved to date in the reduction of large size defects will be summarized, including a description of the main sources of defects and their composition.

Super sensitive UV detector using polymer functionalized nanobelts

DOEpatents

Wang, Zhong L; Lao, Changshi; Zhou, Jun

2012-10-23

An ultraviolet light sensor includes an elongated metal oxide nanostructure, a layer of an ultraviolet light-absorbing polymer, a current source and a current detector. The elongated metal oxide nanostructure has a first end and an opposite second end. The layer of an ultraviolet light-absorbing polymer is disposed about at least a portion of the metal oxide nanostructure. The current source is configured to provide electrons to the first end of the metal oxide nanostructure. The current detector is configured to detect an amount of current flowing through the metal oxide nanostructure. The amount of current flowing through the metal oxide nanostructure corresponds to an amount of ultraviolet light impinging on the metal oxide nanostructure.

Occupational Skin Hazards From Ultraviolet (UV) Exposures

NASA Astrophysics Data System (ADS)

Urbach, F.; Wolbarsht, M. L.

1980-10-01

The various types of UV effects on the skin are classified according to the part of the spectrum and their beneficial or deleterious nature. Some hazardous ultraviolet sources used in industrial processes are described, and examples of photoallergy, phototoxicity, and photosensitization resulting from UV exposures are given. The incidence of skin cancer as a function of geographical location and exposure to sunlight is discussed in relation to natural and artificial exposures to long and short wavelength UV, especially in connection with tanning booths. The conclusion is reached that there is enough ultraviolet in a normal environment to propose a hazard, and additional ultraviolet exposure from industrial or consumer sources is not necessary, and should be eliminated wherever possible.

Occupational Skin Hazards From Ultraviolet (UV) Exposures

NASA Astrophysics Data System (ADS)

Urbach, F.; Wolbarsht, M. L.

1981-11-01

The various types of UV effects on the skin are classified according to the part of the spectrum and their beneficial or deleterious nature. Some hazardous ultraviolet sources used in industrial processes are described, and examples of photoallergy, phototoxicity, and photosensitization resulting from UV exposures are given. The incidence of skin cancer as a function of geographical location and exposure to sunlight is discussed in relation to natural and artificial exposures to long and short wavelength UV, especially in connection with tanning booths. The conclusion is reached that there is enough ultraviolet in a normal environment to propose a hazard, and additional ultraviolet exposure from industrial or consumer sources is not necessary, and should be eliminated wherever possible.

A solar extreme ultraviolet telescope and spectrograph for space shuttle. Volume 1: Investigation and technical plan

NASA Technical Reports Server (NTRS)

Neupert, W. M.

1978-01-01

A scientific investigation of heating and mass transport in the solar corona that is currently planned for a future Shuttle/Spacelab flight is outlined. The instrument to be used is a near-normal incidence grating spectrograph fed by a grazing incidence Wolter Type 2 telescope. A toroidal grating design provides stigmatic images of the corona up to 8 arc min in extent over the spectral region from 225 A to 370 A. Spatial resolution of at least 2 arc sec and spectral resolution of 0.050 A is achievable throughout the central 4 arc min field or view. Primary scientific data are recorded on Schumann-type film. An H-alpha slit jaw monitor and zero order extreme ultraviolet monitor are also planned to support instrument operation.

Extreme Ultraviolet Solar Images Televised In-Flight with a Rocket-Borne SEC Vidicon System.

PubMed

Tousey, R; Limansky, I

1972-05-01

A TV image of the entire sun while an importance 2N solar flare was in progress was recorded in the extreme ultraviolet (XUV) radiation band 171-630 A and transmitted to ground from an Aerobee-150 rocket on 4 November 1969 using S-band telemetry. The camera tube was a Westinghouse Electric Corporation SEC vidicon, with its fiber optic faceplate coated with an XUV to visible conversion layer of p-quaterphenyl. The XUV passband was produced by three 1000-A thick aluminum filters in series together with the platinized reflecting surface of the off-axis paraboloid that imaged the sun. A number of images were recorded with integration times between 1/30 see and 2 sec. Reconstruction of pictures was enhanced by combining several to reduce the noise.

Observation of extreme ultraviolet transitions in highly charged Ba{sup 16+} to Ba{sup 23+} ions with electron beam ion trap

DOE Office of Scientific and Technical Information (OSTI.GOV)

Ali, S.; Shimizu, E.; Nakamura, N.

2016-03-15

We have investigated extreme ultraviolet emission from highly charged barium using a compact electron beam ion trap at the Tokyo EBIT laboratory. The spectra were recorded for several beam energies ranging from 440 to 740 eV, while keeping the electron beam current constant at 10 mA. Radiation from charge states Zr-like Ba{sup 16+} to As-like Ba{sup 23+} were recorded and identified by varying the electron beam energy across the ionization thresholds and comparing with calculated results. The calculations were performed with a detailed relativistic configuration interaction approach using the Flexible Atomic Code. Several new lines belonging to electric dipole transitions were observedmore » and identified.« less

The Extreme Ultraviolet Spectrograph Sounding Rocket Payload: Recent Modifications for Planetary Observations in the EUV/FUV

NASA Technical Reports Server (NTRS)

Slater, David C.; Stern, S. Alan; Scherrer, John; Cash, Webster; Green, James C.; Wilkinson, Erik

1995-01-01

We report on the status of modifications to an existing extreme ultraviolet (EUV) telescope/spectrograph sounding rocket payload for planetary observations in the 800 - 1200 A wavelength band. The instrument is composed of an existing Wolter Type 2 grazing incidence telescope, a newly built 0.4-m normal incidence Rowland Circle spectrograph, and an open-structure resistive-anode microchannel plate detector. The modified payload has successfully completed three NASA sounding rocket flights within 1994-1995. Future flights are anticipated for additional studies of planetary and cometary atmospheres and interstellar absorption. A detailed description of the payload, along with the performance characteristics of the integrated instrument are presented. In addition, some preliminary flight results from the above three missions are also presented.

Extreme-ultraviolet and electron beam lithography processing using water developable resist material

NASA Astrophysics Data System (ADS)

Takei, Satoshi

2017-08-01

In order to achieve the use of pure water in the developable process of extreme-ultraviolet and electron beam lithography, instead of conventionally used tetramethylammonium hydroxide and organic solvents, a water developable resist material was designed and developed. The water-developable resist material was derived from woody biomass with beta-linked disaccharide unit for environmental affair, safety, easiness of handling, and health of the working people. 80 nm dense line patterning images with exposure dose of 22 μC/cm2 and CF4 etching selectivity of 1.8 with hardmask layer were provided by specific process conditions. The approach of our water-developable resist material will be one of the most promising technologies ready to be investigated into production of medical device applications.

Ultraviolet Light Curves of Gaia16apd in Superluminous Supernova Models

DOE Office of Scientific and Technical Information (OSTI.GOV)

Tolstov, Alexey; Zhiglo, Andrey; Nomoto, Ken’ichi

2017-08-10

Observations of Gaia16apd revealed extremely luminous ultraviolet emission among superluminous supernovae (SLSNe). Using radiation hydrodynamics simulations, we perform a comparison of UV light curves, color temperatures, and photospheric velocities between the most popular SLSN models: pair-instability supernova, magnetar, and interaction with circumstellar medium. We find that the interaction model is the most promising to explain the extreme UV luminosity of Gaia16apd. The differences in late-time UV emission and in color evolution found between the models can be used to link an observed SLSN event to the most appropriate model. Observations at UV wavelengths can be used to clarify the naturemore » of SLSNe and more attention should be paid to them in future follow-up observations.« less

Ionospheric Observations During a Geomagnetic Storm from LITES on the ISS

NASA Astrophysics Data System (ADS)

Finn, S. C.; Stephan, A. W.; Cook, T.; Budzien, S. A.; Chakrabarti, S.; Erickson, P. J.; Geddes, G.

2017-12-01

The Limb-Imaging Ionospheric and Thermospheric Extreme-Ultraviolet Spectrograph (LITES) is an extreme-ultraviolet imaging spectrograph that launched in February 2017 and was installed on the International Space Station (ISS). LITES is limb-viewing ( 150 - 350 km tangent altitude) and measures airglow emissions from 60 - 140 nm with 0.2° angular and 1 nm spectral resolutions. We present early LITES results of observations during a G2 geomagnetic storm in April 2017. In addition to LITES data, we will show complementary ground-based incoherent scatter radar (ISR) observations from Millstone Hill during this storm. The combination of LITES EUV space-based observations with the ground-based radio data is an example of the capability of campaign-style measurements of the ionosphere-thermosphere system using multiwavelength ground- and space-based instruments.

The extreme ultraviolet spectrum of G191 - B2B and the ionization of the local interstellar medium

NASA Technical Reports Server (NTRS)

Green, James; Jelinsky, Patrick; Bowyer, Stuart

1990-01-01

The measurement of the extreme ultraviolet spectrum of the nearby hot white dwarf G191 - B2B is reported. The results are used to derive interstellar neutral column densities of 1.6 + or - 0.2 x 10 to the 18th/sq cm and 9.8 + 2.8 or - 2.6 x 10 to the 16th/sq cm for H I and He I, respectively. This ratio of neutral hydrogen to neutral helium indicates that the ionization of hydrogen along the line of sight is less than about 30 percent unless significant helium ionization is present. The scenario in which the hydrogen is highly ionized and the helium is neutral is ruled out by this observation.

Resist Parameter Extraction from Line-and-Space Patterns of Chemically Amplified Resist for Extreme Ultraviolet Lithography

NASA Astrophysics Data System (ADS)

Kozawa, Takahiro; Oizumi, Hiroaki; Itani, Toshiro; Tagawa, Seiichi

2010-11-01

The development of extreme ultraviolet (EUV) lithography has progressed owing to worldwide effort. As the development status of EUV lithography approaches the requirements for the high-volume production of semiconductor devices with a minimum line width of 22 nm, the extraction of resist parameters becomes increasingly important from the viewpoints of the accurate evaluation of resist materials for resist screening and the accurate process simulation for process and mask designs. In this study, we demonstrated that resist parameters (namely, quencher concentration, acid diffusion constant, proportionality constant of line edge roughness, and dissolution point) can be extracted from the scanning electron microscopy (SEM) images of patterned resists without the knowledge on the details of resist contents using two types of latest EUV resist.

Method for the protection of extreme ultraviolet lithography optics

DOEpatents

Grunow, Philip A.; Clift, Wayne M.; Klebanoff, Leonard E.

2010-06-22

A coating for the protection of optical surfaces exposed to a high energy erosive plasma. A gas that can be decomposed by the high energy plasma, such as the xenon plasma used for extreme ultraviolet lithography (EUVL), is injected into the EUVL machine. The decomposition products coat the optical surfaces with a protective coating maintained at less than about 100 .ANG. thick by periodic injections of the gas. Gases that can be used include hydrocarbon gases, particularly methane, PH.sub.3 and H.sub.2S. The use of PH.sub.3 and H.sub.2S is particularly advantageous since films of the plasma-induced decomposition products S and P cannot grow to greater than 10 .ANG. thick in a vacuum atmosphere such as found in an EUVL machine.

Acid generation mechanism in anion-bound chemically amplified resists used for extreme ultraviolet lithography

NASA Astrophysics Data System (ADS)

Komuro, Yoshitaka; Yamamoto, Hiroki; Kobayashi, Kazuo; Ohomori, Katsumi; Kozawa, Takahiro

2015-03-01

Extreme ultraviolet (EUV) lithography is the most promising candidate for the high-volume production of semiconductor devices with half-pitches of sub 10nm. An anion-bound polymer(ABP), in which at the anion part of onium salts is polymerized, has attracted much attention from the viewpoint of the control of acid diffusion. In this study, the acid generation mechanism in ABP films was investigated using γ and EUV radiolysis. On the basis of experimental results, the acid generation mechanism in anion-bound chemically amplified resists was proposed. The protons of acids are considered to be mainly generated through the reaction of phenyl radicals with diphenylsulfide radical cations that are produced through the hole transfer to the decomposition products of onium salts.

Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA's Solar Dynamics Observatory

DOE Office of Scientific and Technical Information (OSTI.GOV)

Soufli, Regina; Baker, Sherry L.; Windt, David L.

2007-06-01

The high-spatial frequency roughness of a mirror operating at extreme ultraviolet (EUV)wavelengths is crucial for the reflective performance and is subject to very stringent specifications. To understand and predict mirror performance, precision metrology is required for measuring the surface roughness. Zerodur mirror substrates made by two different polishing vendors for a suite of EUV telescopes for solar physics were characterized by atomic force microscopy (AFM). The AFM measurements revealed features in the topography of each substrate that are associated with specific polishing techniques. Theoretical predictions of the mirror performance based on the AFM-measured high-spatial-frequency roughness are in good agreement withmore » EUV reflectance measurements of the mirrors after multilayer coating.« less

Ptychographic imaging with partially coherent plasma EUV sources

NASA Astrophysics Data System (ADS)

Bußmann, Jan; Odstrčil, Michal; Teramoto, Yusuke; Juschkin, Larissa

2017-12-01

We report on high-resolution lens-less imaging experiments based on ptychographic scanning coherent diffractive imaging (CDI) method employing compact plasma sources developed for extreme ultraviolet (EUV) lithography applications. Two kinds of discharge sources were used in our experiments: a hollow-cathode-triggered pinch plasma source operated with oxygen and for the first time a laser-assisted discharge EUV source with a liquid tin target. Ptychographic reconstructions of different samples were achieved by applying constraint relaxation to the algorithm. Our ptychography algorithms can handle low spatial coherence and broadband illumination as well as compensate for the residual background due to plasma radiation in the visible spectral range. Image resolution down to 100 nm is demonstrated even for sparse objects, and it is limited presently by the sample structure contrast and the available coherent photon flux. We could extract material properties by the reconstruction of the complex exit-wave field, gaining additional information compared to electron microscopy or CDI with longer-wavelength high harmonic laser sources. Our results show that compact plasma-based EUV light sources of only partial spatial and temporal coherence can be effectively used for lens-less imaging applications. The reported methods may be applied in combination with reflectometry and scatterometry for high-resolution EUV metrology.

Astro-1 Image Taken by Ultraviolet Imaging Telescope

NASA Technical Reports Server (NTRS)

1990-01-01

This image shows a part of the Cygnus loop supernova remnant, taken by the Ultraviolet Imaging Telescope (UIT) on the Astro Observatory during the Astro-1 mission (STS-35) on December 5, 1990. Pictured is a portion of the huge Cygnus loop, an array of interstellar gas clouds that have been blasted by a 900,000 mile per hour shock wave from a prehistoric stellar explosion, which occurred about 20,000 years ago, known as supernova. With ultraviolet and x-rays, astronomers can see emissions from extremely hot gases, intense magnetic fields, and other high-energy phenomena that more faintly appear in visible and infrared light or in radio waves that are crucial to deepening the understanding of the universe. The Astro Observatory was designed to explore the universe by observing and measuring the ultraviolet radiation from celestial objects. Three instruments make up the Astro Observatory: The Hopkins Ultraviolet Telescope (HUT), the Ultraviolet Imaging Telescope (UIT), and the Wisconsin Ultraviolet Photo-Polarimetry Experiment (WUPPE). The Marshall Space Flight Center had managment responsibilities for the Astro-1 mission. The Astro-1 Observatory was launched aboard the Space Shuttle Orbiter Columbia (STS-35) on December 2, 1990.

Diffractive element in extreme-UV lithography condenser

DOEpatents

Sweatt, William C.; Ray-Chaudhuri, Avijit

2001-01-01

Condensers having a mirror with a diffraction grating in projection lithography using extreme ultra-violet significantly enhances critical dimension control. The diffraction grating has the effect of smoothing the illumination at the camera's entrance pupil with minimum light loss. Modeling suggests that critical dimension control for 100 nm features can be improved from 3 nm to less than about 0.5 nm.

Diffractive element in extreme-UV lithography condenser

DOEpatents

Sweatt, William C.; Ray-Chaudhurl, Avijit K.

2000-01-01

Condensers having a mirror with a diffraction grating in projection lithography using extreme ultra-violet significantly enhances critical dimension control. The diffraction grating has the effect of smoothing the illumination at the camera's entrance pupil with minimum light loss. Modeling suggests that critical dimension control for 100 nm features can be improved from 3 nm to less than about 0.5 nm.

The extreme ultraviolet explorer archive

NASA Astrophysics Data System (ADS)

Polomski, E.; Drake, J. J.; Dobson, C.; Christian, C.

1993-09-01

The Extreme Ultrviolet Explorer (EUVE) public archive was created to handle the storage, maintenance, and distribution of EUVE data and ancillary documentation, information, and software. Access to the archive became available to the public on July 17, 1992, only 40 days after the launch of the EUVE satellite. A brief overview of the archive's contents and the various methods of access will be described.

The MUSCLES Treasury Survey. II. Intrinsic LYα and Extreme Ultraviolet Spectra of K and M Dwarfs with Exoplanets*

NASA Astrophysics Data System (ADS)

Youngblood, Allison; France, Kevin; Loyd, R. O. Parke; Linsky, Jeffrey L.; Redfield, Seth; Schneider, P. Christian; Wood, Brian E.; Brown, Alexander; Froning, Cynthia; Miguel, Yamila; Rugheimer, Sarah; Walkowicz, Lucianne

2016-06-01

The ultraviolet (UV) spectral energy distributions (SEDs) of low-mass (K- and M-type) stars play a critical role in the heating and chemistry of exoplanet atmospheres, but are not observationally well-constrained. Direct observations of the intrinsic flux of the Lyα line (the dominant source of UV photons from low-mass stars) are challenging, as interstellar H I absorbs the entire line core for even the closest stars. To address the existing gap in empirical constraints on the UV flux of K and M dwarfs, the MUSCLES Hubble Space Telescope Treasury Survey has obtained UV observations of 11 nearby M and K dwarfs hosting exoplanets. This paper presents the Lyα and extreme-UV spectral reconstructions for the MUSCLES targets. Most targets are optically inactive, but all exhibit significant UV activity. We use a Markov Chain Monte Carlo technique to correct the observed Lyα profiles for interstellar absorption, and we employ empirical relations to compute the extreme-UV SED from the intrinsic Lyα flux in ˜100 Å bins from 100-1170 Å. The reconstructed Lyα profiles have 300 km s-1 broad cores, while >1% of the total intrinsic Lyα flux is measured in extended wings between 300 and 1200 km s-1. The Lyα surface flux positively correlates with the Mg II surface flux and negatively correlates with the stellar rotation period. Stars with larger Lyα surface flux also tend to have larger surface flux in ions formed at higher temperatures, but these correlations remain statistically insignificant in our sample of 11 stars. We also present H I column density measurements for 10 new sightlines through the local interstellar medium. Based on observations made with the NASA/ESA Hubble Space Telescope, obtained from the data archive at the Space Telescope Science Institute. STScI is operated by the Association of Universities for Research in Astronomy, Inc. under NASA contract NAS 5-26555.

Extreme ultraviolet probing of nonequilibrium dynamics in high energy density germanium

NASA Astrophysics Data System (ADS)

Principi, E.; Giangrisostomi, E.; Mincigrucci, R.; Beye, M.; Kurdi, G.; Cucini, R.; Gessini, A.; Bencivenga, F.; Masciovecchio, C.

2018-05-01

Intense femtosecond infrared laser pulses induce a nonequilibrium between thousands of Kelvin hot valence electrons and room-temperature ions in a germanium sample foil. The evolution of this exotic state of matter is monitored with time-resolved extreme ultraviolet absorption spectroscopy across the Ge M2 ,3 edge (≃30 eV ) using the FERMI free-electron laser. We analyze two distinct regimes in the ultrafast dynamics in laser-excited Ge: First, on a subpicosecond time scale, the electron energy distribution thermalizes to an extreme temperature unreachable in equilibrium solid germanium; then, during the following picoseconds, the lattice reacts strongly altering the electronic structure and resulting in melting to a metallic state alongside a breakdown of the local atomic order. Data analysis, based on a hybrid approach including both numerical and analytical calculations, provides an estimation of the electron and ion temperatures, the electron density of states, the carrier-phonon relaxation time, as well as the carrier density and lattice heat capacity under those extreme nonequilibrium conditions. Related structural anomalies, such as the occurrence of a transient low-density liquid phase and the possible drop in lattice heat capacity are discussed.

Filtering and polychromatic vision in mantis shrimps: themes in visible and ultraviolet vision.

PubMed

Cronin, Thomas W; Bok, Michael J; Marshall, N Justin; Caldwell, Roy L

2014-01-01

Stomatopod crustaceans have the most complex and diverse assortment of retinal photoreceptors of any animals, with 16 functional classes. The receptor classes are subdivided into sets responsible for ultraviolet vision, spatial vision, colour vision and polarization vision. Many of these receptor classes are spectrally tuned by filtering pigments located in photoreceptors or overlying optical elements. At visible wavelengths, carotenoproteins or similar substances are packed into vesicles used either as serial, intrarhabdomal filters or lateral filters. A single retina may contain a diversity of these filtering pigments paired with specific photoreceptors, and the pigments used vary between and within species both taxonomically and ecologically. Ultraviolet-filtering pigments in the crystalline cones serve to tune ultraviolet vision in these animals as well, and some ultraviolet receptors themselves act as birefringent filters to enable circular polarization vision. Stomatopods have reached an evolutionary extreme in their use of filter mechanisms to tune photoreception to habitat and behaviour, allowing them to extend the spectral range of their vision both deeper into the ultraviolet and further into the red.

Spacelab

NASA Image and Video Library

1990-12-05

This image shows a part of the Cygnus loop supernova remnant, taken by the Ultraviolet Imaging Telescope (UIT) on the Astro Observatory during the Astro-1 mission (STS-35) on December 5, 1990. Pictured is a portion of the huge Cygnus loop, an array of interstellar gas clouds that have been blasted by a 900,000 mile per hour shock wave from a prehistoric stellar explosion, which occurred about 20,000 years ago, known as supernova. With ultraviolet and x-rays, astronomers can see emissions from extremely hot gases, intense magnetic fields, and other high-energy phenomena that more faintly appear in visible and infrared light or in radio waves that are crucial to deepening the understanding of the universe. The Astro Observatory was designed to explore the universe by observing and measuring the ultraviolet radiation from celestial objects. Three instruments make up the Astro Observatory: The Hopkins Ultraviolet Telescope (HUT), the Ultraviolet Imaging Telescope (UIT), and the Wisconsin Ultraviolet Photo-Polarimetry Experiment (WUPPE). The Marshall Space Flight Center had managment responsibilities for the Astro-1 mission. The Astro-1 Observatory was launched aboard the Space Shuttle Orbiter Columbia (STS-35) on December 2, 1990.

Using input feature information to improve ultraviolet retrieval in neural networks

NASA Astrophysics Data System (ADS)

Sun, Zhibin; Chang, Ni-Bin; Gao, Wei; Chen, Maosi; Zempila, Melina

2017-09-01

In neural networks, the training/predicting accuracy and algorithm efficiency can be improved significantly via accurate input feature extraction. In this study, some spatial features of several important factors in retrieving surface ultraviolet (UV) are extracted. An extreme learning machine (ELM) is used to retrieve the surface UV of 2014 in the continental United States, using the extracted features. The results conclude that more input weights can improve the learning capacities of neural networks.

Optical to extreme ultraviolet reddening curves for normal AGN dust and for dust associated with high-velocity outflows

NASA Astrophysics Data System (ADS)

Singh, Japneet; Gaskell, Martin; Gill, Jake

2017-01-01

We use mid-IR (WIRE), optical (SDSS), and ultraviolet (GALEX) photometry of over 80,000 AGNs to derive mean attenuation curves from the optical to the rest frame extreme ultraviolet (EUV) for (i) “normal” AGN dust dominating the optical reddening of AGNs and (ii) “BAL dust” - the dust causing the additional extinction in AGNs observed to have broad absorption lines (BALs). Our method confirms that the attenuation curve of “normal” AGN dust is flat in the ultraviolet, as found by Gaskell et al. (2004). In striking contrast to this, the attenuation curve for BAL dust is well fit by a steeply-rising, SMC-like curve. We confirm the shape of the theoretical Weingartner & Draine (2001) SMC curve out to 700 Angstroms but the drop in attenuation to still shorter wavelengths (400 Angstroms) seems to be less than predicted. We find identical attenuation curves for high-ionization and low-ionization BALQSOs. We suggest that attenuation curves appearing to be steeper than the SMC are due to differences in underlying spectra and partial covering by BAL dust. This work was This work was performed under the auspices of the Science Internship Program (SIP) of the University of California at Santa Cruz performed under the auspices of the Science Internship Program (SIP) of the University of California at Santa Cruz.

Miniaturized, High-Speed, Modulated X-Ray Source

NASA Technical Reports Server (NTRS)

Gendreau, Keith; Arzoumanian, Zaven; Kenyon, Steve; Spartana, Nick

2013-01-01

A low-cost, miniature x-ray source has been developed that can be modulated in intensity from completely off to full intensity on nanosecond timescales. This modulated x-ray source (MXS) has no filaments and is extremely rugged. The energy level of the MXS is adjustable from 0 to more than 100 keV. It can be used as the core of many new devices, providing the first practical, arbitrarily time-variable source of x-rays. The high-speed switching capability and miniature size make possible many new technologies including x-ray-based communication, compact time-resolved x-ray diffraction, novel x-ray fluorescence instruments, and low- and precise-dose medical x-rays. To make x-rays, the usual method is to accelerate electrons into a target material held at a high potential. When the electrons stop in the target, x-rays are produced with a spectrum that is a function of the target material and the energy to which the electrons are accelerated. Most commonly, the electrons come from a hot filament. In the MXS, the electrons start off as optically driven photoelectrons. The modulation of the x-rays is then tied to the modulation of the light that drives the photoelectron source. Much of the recent development has consisted of creating a photoelectrically-driven electron source that is robust, low in cost, and offers high intensity. For robustness, metal photocathodes were adopted, including aluminum and magnesium. Ultraviolet light from 255- to 350-nm LEDs (light emitting diodes) stimulated the photoemissions from these photocathodes with an efficiency that is maximized at the low-wavelength end (255 nm) to a value of roughly 10(exp -4). The MXS units now have much higher brightness, are much smaller, and are made using a number of commercially available components, making them extremely inexpensive. In the latest MXS design, UV efficiency is addressed by using a high-gain electron multiplier. The photocathode is vapor-deposited onto the input cone of a Burle Magnum(TradeMark) multiplier. This system yields an extremely robust photon-driven electron source that can tolerate long, weeks or more, exposure to air with negligible degradation. The package is also small. When combined with the electron target, necessary vacuum fittings, and supporting components (but not including LED electronics or high-voltage sources), the entire modulated x-ray source weighs as little as 158 grams.

Analysis of UV-excited fluorochromes by flow cytometry using near-ultraviolet laser diodes.

PubMed

Telford, William G

2004-09-01

Violet laser diodes have become common and reliable laser sources for benchtop flow cytometers. While these lasers are very useful for a variety of violet and some ultraviolet-excited fluorochromes (e.g., DAPI), they do not efficiently excite most UV-stimulated probes. In this study, the next generation of InGaN near-UV laser diodes (NUVLDs) emitting in the 370-375-nm range have been evaluated as laser sources for cuvette-based flow cytometers. Several NUVLDs, ranging in wavelength from 370 to 374 nm and in power level from 1.5 to 10 mW, were mounted on a BD Biosciences LSR II and evaluated for their ability to excite cells labeled with the UV DNA binding dye DAPI, several UV phenotyping fluorochromes (including Alexa Fluor 350, Marina Blue, and quantum dots), and the fluorescent calcium chelator indo-1. NUVLDs at the 8-10-mW power range gave detection sensitivity levels comparable to more powerful solid-state and ion laser sources, using low-fluorescence microsphere beads as measurement standards. NUVLDs at all tested power levels allowed extremely high-resolution DAPI cell cycle analysis, and sources in the 8-10-mW power range excited Alexa Fluor 350, Marina Blue, and a variety of quantum dots at virtually the same signal-to-noise ratios as more powerful UV sources. These evaluations indicate that near-UV laser diodes installed on a cuvette-based flow cytometer performed nearly as well as more powerful solid-state UV lasers on the same instrumentation, and comparably to more powerful ion lasers on a jet-in-air system, and. Despite their limited power, integration of these small and inexpensive lasers into benchtop flow cytometers should allow the use of flow cytometric applications requiring UV excitation on a wide variety of instruments. Copyright 2004 Wiley-Liss, Inc.

Advances in remote sensing of the daytime ionosphere with EUV airglow

NASA Astrophysics Data System (ADS)

Stephan, Andrew W.

2016-09-01

This paper summarizes recent progress in developing a method for characterizing the daytime ionosphere from limb profile measurements of the OII 83.4 nm emission. This extreme ultraviolet emission is created by solar photoionization of atomic oxygen in the lower thermosphere and is resonantly scattered by O+ in the ionosphere. The brightness and shape of the measured altitude profile thus depend on both the photoionization source in the lower thermosphere and the ionospheric densities that determine the resonant scattering contribution. This technique has greatly matured over the past decade due to measurements by the series of Naval Research Laboratory Special Sensor Ultraviolet Limb Imager (SSULI) instruments flown on Defense Meteorological Satellite Program (DMSP) missions and the Remote Atmospheric and Ionospheric Detection System (RAIDS) on the International Space Station. The volume of data from these missions has enabled a better approach to handling specific biases and uncertainties in both the measurement and retrieval process that affect the accuracy of the result. This paper identifies the key measurement and data quality factors that will enable the continued evolution of this technique into an advanced method for characterization of the daytime ionosphere.

Autonomous celestial navigation based on Earth ultraviolet radiance and fast gradient statistic feature extraction

NASA Astrophysics Data System (ADS)

Lu, Shan; Zhang, Hanmo

2016-01-01

To meet the requirement of autonomous orbit determination, this paper proposes a fast curve fitting method based on earth ultraviolet features to obtain accurate earth vector direction, in order to achieve the high precision autonomous navigation. Firstly, combining the stable characters of earth ultraviolet radiance and the use of transmission model software of atmospheric radiation, the paper simulates earth ultraviolet radiation model on different time and chooses the proper observation band. Then the fast improved edge extracting method combined Sobel operator and local binary pattern (LBP) is utilized, which can both eliminate noises efficiently and extract earth ultraviolet limb features accurately. And earth's centroid locations on simulated images are estimated via the least square fitting method using part of the limb edges. Taken advantage of the estimated earth vector direction and earth distance, Extended Kalman Filter (EKF) is applied to realize the autonomous navigation finally. Experiment results indicate the proposed method can achieve a sub-pixel earth centroid location estimation and extremely enhance autonomous celestial navigation precision.

Elongated Coronal Hole

NASA Image and Video Library

2016-03-24

NASA Solar Dynamics Observatory shows a long coronal hole has rotated so that was temporarily facing right towards Earth Mar. 23-25, 2016. Coronal holes appear dark when viewed in some wavelengths of extreme ultraviolet light.

Detection of significant differences between absorption spectra of neutral helium and low temperature photoionized helium plasmas

DOE Office of Scientific and Technical Information (OSTI.GOV)

Bartnik, A.; Wachulak, P.; Fiedorowicz, H.

2013-11-15

In this work, spectral investigations of photoionized He plasmas were performed. The photoionized plasmas were created by irradiation of helium stream, with intense pulses from laser-plasma extreme ultraviolet (EUV) source. The EUV source was based on a double-stream Xe/Ne gas-puff target irradiated with 10 ns/10 J Nd:YAG laser pulses. The most intense emission from the source spanned a relatively narrow spectral region below 20 nm, however, spectrally integrated intensity at longer wavelengths was also significant. The EUV radiation was focused onto a gas stream, injected into a vacuum chamber synchronously with the EUV pulse. The long-wavelength part of the EUVmore » radiation was used for backlighting of the photoionized plasmas to obtain absorption spectra. Both emission and absorption spectra in the EUV range were investigated. Significant differences between absorption spectra acquired for neutral helium and low temperature photoionized plasmas were demonstrated for the first time. Strong increase of intensities and spectral widths of absorption lines, together with a red shift of the K-edge, was shown.« less

Handle-shaped Prominence

NASA Image and Video Library

2001-02-17

NASA Extreme Ultraviolet Imaging Telescope aboard ESA’s SOHO spacecraft took this image of a huge, handle-shaped prominence in 1999. Prominences are huge clouds of relatively cool dense plasma suspended in the Sun hot, thin corona.

Large-scale freestanding nanometer-thick graphite pellicles for mass production of nanodevices beyond 10 nm.

PubMed

Kim, Seul-Gi; Shin, Dong-Wook; Kim, Taesung; Kim, Sooyoung; Lee, Jung Hun; Lee, Chang Gu; Yang, Cheol-Woong; Lee, Sungjoo; Cho, Sang Jin; Jeon, Hwan Chul; Kim, Mun Ja; Kim, Byung-Gook; Yoo, Ji-Beom

2015-09-21

Extreme ultraviolet lithography (EUVL) has received much attention in the semiconductor industry as a promising candidate to extend dimensional scaling beyond 10 nm. We present a new pellicle material, nanometer-thick graphite film (NGF), which shows an extreme ultraviolet (EUV) transmission of 92% at a thickness of 18 nm. The maximum temperature induced by laser irradiation (λ = 800 nm) of 9.9 W cm(-2) was 267 °C, due to the high thermal conductivity of the NGF. The freestanding NGF was found to be chemically stable during annealing at 500 °C in a hydrogen environment. A 50 × 50 mm large area freestanding NGF was fabricated using the wet and dry transfer (WaDT) method. The NGF can be used as an EUVL pellicle for the mass production of nanodevices beyond 10 nm.

High-resolution Fourier-transform extreme ultraviolet photoabsorption spectroscopy of 14N15N

NASA Astrophysics Data System (ADS)

Heays, A. N.; Dickenson, G. D.; Salumbides, E. J.; de Oliveira, N.; Joyeux, D.; Nahon, L.; Lewis, B. R.; Ubachs, W.

2011-12-01

The first comprehensive high-resolution photoabsorption spectrum of 14N15N has been recorded using the Fourier-transform spectrometer attached to the Desirs beamline at the Soleil synchrotron. Observations are made in the extreme ultraviolet and span 100 000-109 000 cm-1 (100-91.7 nm). The observed absorption lines have been assigned to 25 bands and reduced to a set of transition energies, f values, and linewidths. This analysis has verified the predictions of a theoretical model of N2 that simulates its photoabsorption and photodissociation cross section by solution of an isotopomer independent formulation of the coupled-channel Schrödinger equation. The mass dependence of predissociation linewidths and oscillator strengths is clearly evident and many local perturbations of transition energies, strengths, and widths within individual rotational series have been observed.

Planckian charged black holes in ultraviolet self-complete quantum gravity

NASA Astrophysics Data System (ADS)

Nicolini, Piero

2018-03-01

We present an analysis of the role of the charge within the self-complete quantum gravity paradigm. By studying the classicalization of generic ultraviolet improved charged black hole solutions around the Planck scale, we showed that the charge introduces important differences with respect to the neutral case. First, there exists a family of black hole parameters fulfilling the particle-black hole condition. Second, there is no extremal particle-black hole solution but quasi extremal charged particle-black holes at the best. We showed that the Hawking emission disrupts the condition of particle-black hole. By analyzing the Schwinger pair production mechanism, the charge is quickly shed and the particle-black hole condition can ultimately be restored in a cooling down phase towards a zero temperature configuration, provided non-classical effects are taken into account.

Solar Golden Arches

NASA Image and Video Library

2017-12-08

The magnetic field lines between a pair of active regions formed a beautiful set of swaying arches, seen in this footage captured by NASA’s Solar Dynamics Observatory on April 24-26, 2017. The arches are traced out by charged particles spinning along the magnetic field lines. These arches, which form a connection between regions of opposite magnetic polarity, are visible in exquisite detail in this wavelength of extreme ultraviolet light. Extreme ultraviolet light is typically invisible to our eyes, but is colorized here in gold. Credit: NASA/Goddard/SDO NASA image use policy. NASA Goddard Space Flight Center enables NASA’s mission through four scientific endeavors: Earth Science, Heliophysics, Solar System Exploration, and Astrophysics. Goddard plays a leading role in NASA’s accomplishments by contributing compelling scientific knowledge to advance the Agency’s mission. Follow us on Twitter Like us on Facebook Find us on Instagram

Extreme ultraviolet observations from Voyager 1 encounter with Jupiter

NASA Technical Reports Server (NTRS)

Broadfoot, A. L.; Belton, M. J. S.; Takacs, P. Z.; Sandel, B. R.; Shemansky, D. E.; Holberg, J. B.; Ajello, J. M.; Atreya, S. K.; Donahue, T. M.; Moos, H. W.

1979-01-01

Observations of the optical extreme ultraviolet spectrum of the Jupiter planetary system during the Voyager 1 encounter have revealed previously undetected physical processes of significant proportions. Bright emission lines of S(+2), S(+3), O(+2) indicating an electron temperature of 100,000 K have been identified in preliminary analyses of the Io plasma torus spectrum. Strong auroral atomic and molecular hydrogen emissions have been observed in the polar regions of Jupiter near magnetic field lines that map the torus into the atmosphere of Jupiter. The observed resonance scattering of solar hydrogen Lyman alpha by the atmosphere of Jupiter and the solar occultation experiment suggest a hot thermosphere (greater than or equal to 1000 K) with a large atomic hydrogen abundance. A stellar occultation by Ganymede indicates that its atmosphere is at most an exosphere.

Upgrade of absolute extreme ultraviolet diagnostic on J-TEXT

DOE Office of Scientific and Technical Information (OSTI.GOV)

Zhang, X. L.; Cheng, Z. F., E-mail: chengfe@hust.edu.cn; Hou, S. Y.

The absolute extreme ultraviolet (AXUV) diagnostic system is used for radiation observation on J-TEXT tokamak [J. Zhang, G. Zhuang, Z. J. Wang, Y. H. Ding, X. Q. Zhang, and Y. J. Tang, Rev. Sci. Instrum. 81, 073509 (2010)]. The upgrade of the AXUV system is aimed to improve the spatial resolution and provide a three-dimensional image on J-TEXT. The new system consists of 12 AXUV arrays (4 AXUV16ELG arrays, 8 AXUV20ELG arrays). The spatial resolution in the cross-section is 21 mm for the AXUV16ELG arrays and 17 mm for the AXUV20ELG arrays. The pre-amplifier is also upgraded for a highermore » signal to noise ratio. By upgrading the AXUV imaging system, a more accurate observation on the radiation information is obtained.« less

Use of MgF2 and LiF photocathodes in the extreme ultraviolet.

NASA Technical Reports Server (NTRS)

Lapson, L. B.; Timothy, J. G.

1973-01-01

The photoelectric yields of 2000-A thick samples of MgF2 and LiF have been measured at wavelengths in the range from 1216 to 461 A. Peak values of 43 and 34%, respectively, were obtained at wavelengths around 550 A at 45 deg incidence. Coating the cathode of a channel electron multiplier with 3000 A of MgF2 produced no significant deterioration in the electrical properties and increased the sensitivity by factors of 1.62, 2.76, and 2.60 at wavelengths of 742, 584, and 461 A, respectively. Since the stability of response of the MgF2 photocathodes appears to be equal to that of conventional metallic and semiconducting cathodes, it is concluded that MgF2 would be a practical, high-efficiency photocathode for use in the extreme ultraviolet.

The extreme ultraviolet spectroscope for planetary science, EXCEED

NASA Astrophysics Data System (ADS)

Yoshioka, K.; Murakami, G.; Yamazaki, A.; Tsuchiya, F.; Kagitani, M.; Sakanoi, T.; Kimura, T.; Uemizu, K.; Uji, K.; Yoshikawa, I.

2013-09-01

The extreme ultraviolet spectroscope EXtrem ultraviolet spetrosCope for ExosphEric Dynamics (EXCEED) on board the SPRINT-A mission will be launched in the summer of 2013 by the new Japanese solid propulsion rocket Epsilon as its first attempt, and it will orbit around the Earth with an orbital altitude of around 1000 km. EXCEED is dedicated to and optimized for observing the terrestrial planets Mercury, Venus and Mars, as well as Jupiter for several years. The instrument consists of an off axis parabolic entrance mirror, switchable slits with multiple filters and shapes, a toroidal grating, and a photon counting detector, together with a field of view guiding camera. The design goal is to achieve a large effective area but with high spatial and spectral resolution. In this paper, the performance of each optical component will be described as determined from the results of test evaluation of flight models. In addition, the results of the optical calibration of the overall instrument are also shown. As a result, the spectral resolution of EXCEED is found to be 0.3-0.5 nm Full Width at Half Maximum (FWHM) over the entire spectral band (52-148 nm) and the spatial resolution achieve was 10". The evaluated effective area is around 3 cm2. Based on these specifications, the possibility of EXCEED detecting atmospheric ions or atoms around Mercury, Venus, and Mars will be discussed. In addition, we estimate the spectra that might be detected from the Io plasma torus around Jupiter for various hypothetical plasma parameters.

AN AUTOMATIC DETECTION METHOD FOR EXTREME-ULTRAVIOLET DIMMINGS ASSOCIATED WITH SMALL-SCALE ERUPTION

DOE Office of Scientific and Technical Information (OSTI.GOV)

Alipour, N.; Safari, H.; Innes, D. E.

2012-02-10

Small-scale extreme-ultraviolet (EUV) dimming often surrounds sites of energy release in the quiet Sun. This paper describes a method for the automatic detection of these small-scale EUV dimmings using a feature-based classifier. The method is demonstrated using sequences of 171 Angstrom-Sign images taken by the STEREO/Extreme UltraViolet Imager (EUVI) on 2007 June 13 and by Solar Dynamics Observatory/Atmospheric Imaging Assembly on 2010 August 27. The feature identification relies on recognizing structure in sequences of space-time 171 Angstrom-Sign images using the Zernike moments of the images. The Zernike moments space-time slices with events and non-events are distinctive enough to be separatedmore » using a support vector machine (SVM) classifier. The SVM is trained using 150 events and 700 non-event space-time slices. We find a total of 1217 events in the EUVI images and 2064 events in the AIA images on the days studied. Most of the events are found between latitudes -35 Degree-Sign and +35 Degree-Sign . The sizes and expansion speeds of central dimming regions are extracted using a region grow algorithm. The histograms of the sizes in both EUVI and AIA follow a steep power law with slope of about -5. The AIA slope extends to smaller sizes before turning over. The mean velocity of 1325 dimming regions seen by AIA is found to be about 14 km s{sup -1}.« less

Linking mercury, carbon, and nitrogen stable isotopes in Tibetan biota: Implications for using mercury stable isotopes as source tracers

PubMed Central

Xu, Xiaoyu; Zhang, Qianggong; Wang, Wen-Xiong

2016-01-01

Tibetan Plateau is located at a mountain region isolated from direct anthropogenic sources. Mercury concentrations and stable isotopes of carbon, nitrogen, and mercury were analyzed in sediment and biota for Nam Co and Yamdrok Lake. Biotic mercury concentrations and high food web magnification factors suggested that Tibetan Plateau is no longer a pristine site. The primary source of methylmercury was microbial production in local sediment despite the lack of direct methylmercury input. Strong ultraviolet intensity led to extensive photochemical reactions and up to 65% of methylmercury in water was photo-demethylated before entering the food webs. Biota displayed very high Δ199Hg signatures, with some highest value (8.6%) ever in living organisms. The δ202Hg and Δ199Hg in sediment and biotic samples increased with trophic positions (δ15N) and %methylmercury. Fish total length closely correlated to δ13C and Δ199Hg values due to dissimilar carbon sources and methylmercury pools in different living waters. This is the first mercury isotope study on high altitude lake ecosystems that demonstrated specific isotope fractionations of mercury under extreme environmental conditions. PMID:27151563

Longitudinal Ionospheric Variability Observed by LITES on the ISS

NASA Astrophysics Data System (ADS)

Stephan, A. W.; Finn, S. C.; Cook, T.; Geddes, G.; Chakrabarti, S.; Budzien, S. A.

2017-12-01

The Limb-Imaging Ionospheric and Thermospheric Extreme-Ultraviolet Spectrograph (LITES) is an imaging spectrograph designed to measure altitude profiles (150-350 km) of extreme- and far-ultraviolet airglow emissions that originate from photochemical processes in the ionosphere and thermosphere. During the daytime, LITES observes the bright O+ 83.4 nm emission from which the ionospheric profile can be inferred. At night, recombination emissions at 91.1 and 135.6 nm provide a direct measure of the electron content along the line of sight. LITES was launched and installed on the International Space Station (ISS) in late February 2017 where it has been operating along with the highly complementary GPS Radio Occultation and Ultraviolet Photometry - Colocated (GROUP-C) experiment. We will present some of the first observations from LITES in April 2017 that show longitudinal patterns in ionospheric density and the daily variability in those patterns. LITES vertical imaging from a vantage point near 410 km enables a particularly unique perspective on the altitude of the ionospheric peak density at night that can complement and inform other ground- and space-based measurements, and track the longitude-altitude variability that is reflective of changes in equatorial electrodynamics.

Surface modification of polymers for biocompatibility via exposure to extreme ultraviolet radiation.

PubMed

Inam Ul Ahad; Bartnik, Andrzej; Fiedorowicz, Henryk; Kostecki, Jerzy; Korczyc, Barbara; Ciach, Tomasz; Brabazon, Dermot

2014-09-01

Polymeric biomaterials are being widely used for the treatment of various traumata, diseases and defects in human beings due to ease in their synthesis. As biomaterials have direct interaction with the extracellular environment in the biological world, biocompatibility is a topic of great significance. The introduction or enhancement of biocompatibility in certain polymers is still a challenge to overcome. Polymer biocompatibility can be controlled by surface modification. Various physical and chemical methods (e.g., chemical and plasma treatment, ion implantation, and ultraviolet irradiation etc.) are in use or being developed for the modification of polymer surfaces. However an important limitation in their employment is the alteration of bulk material. Different surface and bulk properties of biomaterials are often desirable for biomedical applications. Because extreme ultraviolet (EUV) radiation penetration is quite limited even in low density mediums, it could be possible to use it for surface modification without influencing the bulk material. This article reviews the degree of biocompatibility of different polymeric biomaterials being currently employed in various biomedical applications, the surface properties required to be modified for biocompatibility control, plasma and laser ablation based surface modification techniques, and research studies indicating possible use of EUV for enhancing biocompatibility. © 2013 Wiley Periodicals, Inc.

Nearly amorphous Mo-N gratings for ultimate resolution in extreme ultraviolet interference lithography

NASA Astrophysics Data System (ADS)

Wang, L.; Kirk, E.; Wäckerlin, C.; Schneider, C. W.; Hojeij, M.; Gobrecht, J.; Ekinci, Y.

2014-06-01

We present fabrication and characterization of high-resolution and nearly amorphous Mo1 - xNx transmission gratings and their use as masks for extreme ultraviolet (EUV) interference lithography. During sputter deposition of Mo, nitrogen is incorporated into the film by addition of N2 to the Ar sputter gas, leading to suppression of Mo grain growth and resulting in smooth and homogeneous thin films with a negligible grain size. The obtained Mo0.8N0.2 thin films, as determined by x-ray photoelectron spectroscopy, are characterized to be nearly amorphous using x-ray diffraction. We demonstrate a greatly reduced Mo0.8N0.2 grating line edge roughness compared with pure Mo grating structures after e-beam lithography and plasma dry etching. The amorphous Mo0.8N0.2 thin films retain, to a large extent, the benefits of Mo as a phase grating material for EUV wavelengths, providing great advantages for fabrication of highly efficient diffraction gratings with extremely low roughness. Using these grating masks, well-resolved dense lines down to 8 nm half-pitch are fabricated with EUV interference lithography.

Bright high-order harmonic generation with controllable polarization from a relativistic plasma mirror

PubMed Central

Chen, Zi-Yu; Pukhov, Alexander

2016-01-01

Ultrafast extreme ultraviolet (XUV) sources with a controllable polarization state are powerful tools for investigating the structural and electronic as well as the magnetic properties of materials. However, such light sources are still limited to only a few free-electron laser facilities and, very recently, to high-order harmonic generation from noble gases. Here we propose and numerically demonstrate a laser–plasma scheme to generate bright XUV pulses with fully controlled polarization. In this scheme, an elliptically polarized laser pulse is obliquely incident on a plasma surface, and the reflected radiation contains pulse trains and isolated circularly or highly elliptically polarized attosecond XUV pulses. The harmonic polarization state is fully controlled by the laser–plasma parameters. The mechanism can be explained within the relativistically oscillating mirror model. This scheme opens a practical and promising route to generate bright attosecond XUV pulses with desirable ellipticities in a straightforward and efficient way for a number of applications. PMID:27531047

Short-wavelength ablation of polymers in the high-fluence regime

NASA Astrophysics Data System (ADS)

Liberatore, Chiara; Mann, Klaus; Müller, Matthias; Pina, Ladislav; Juha, Libor; Vyšín, Ludek; Rocca, Jorge J.; Endo, Akira; Mocek, Tomas

2014-05-01

Short-wavelength ablation of poly(1,4-phenylene ether-ether-sulfone) (PPEES) and poly(methyl methacrylate) (PMMA) was investigated using extreme ultraviolet (XUV) and soft x-ray (SXR) radiation from plasma-based sources. The initial experiment was performed with a 10 Hz desktop capillary-discharge XUV laser lasing at 46.9 nm. The XUV laser beam was focused onto the sample by a spherical mirror coated with a Si/Sc multilayer. The same materials were irradiated with 13.5 nm radiation emitted by plasmas produced by focusing an optical laser beam onto a xenon gas-puff target. A Schwarzschild focusing optics coated with a Mo/Si multilayer was installed at the source to achieve energy densities exceeding 0.1 J cm-2 in the tight focus. The existing experimental system at the Laser Laboratorium Göttingen was upgraded by implementing a 1.2 J driving laser. An increase of the SXR fluence was secured by improving the alignment technique.

Long-term operation of surface high-harmonic generation from relativistic oscillating mirrors using a spooling tape

DOE PAGES

Bierbach, Jana; Yeung, Mark; Eckner, Erich; ...

2015-05-01

Surface high-harmonic generation in the relativistic regime is demonstrated as a source of extreme ultra-violet (XUV) pulses with extended operation time. Relativistic high-harmonic generation is driven by a frequency-doubled high-power Ti:Sapphire laser focused to a peak intensity of 3·1019 W/cm2 onto spooling tapes. We demonstrate continuous operation over up to one hour runtime at a repetition rate of 1 Hz. Harmonic spectra ranging from 20 eV to 70 eV (62 nm to 18 nm) were consecutively recorded by an XUV spectrometer. An average XUV pulse energy in the µJ range is measured. With the presented setup, relativistic surface high-harmonic generationmore » becomes a powerful source of coherent XUV pulses that might enable applications in, e.g. attosecond laser physics and the seeding of free-electron lasers, when the laser issues causing 80-% pulse energy fluctuations are overcome.« less

Corona And Ultraviolet Equipment For Testing Materials

NASA Technical Reports Server (NTRS)

Laue, Eric G.

1993-01-01

Two assemblies of laboratory equipment developed for use in testing abilities of polymers, paints, and other materials to withstand ultraviolet radiation and charged particles. One is vacuum ultraviolet source built around commercial deuterium lamp. Other exposes specimen in partial vacuum to both ultraviolet radiation and brush corona discharge. Either or both assemblies used separately or together to simulate approximately combination of solar radiation and charged particles encountered by materials aboard spacecraft in orbit around Earth. Also used to provide rigorous environmental tests of materials exposed to artificial ultraviolet radiation and charged particles in industrial and scientific settings or to natural ultraviolet radiation and charged particles aboard aircraft at high altitudes.

Large area, surface discharge pumped, vacuum ultraviolet light source

DOEpatents

Sze, Robert C.; Quigley, Gerard P.

1996-01-01

Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source. A contamination-free VUV light source having a 225 cm.sup.2 emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm.sup.2 at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing.

Laboratory Data for X-Ray Astronomy

NASA Technical Reports Server (NTRS)

Beiersdorfer, P.; Brown, G. V.; Chen, H.; Gu, M.-F.; Kahn, S. M.; Lepson, J. K.; Savin, D. W.; Utter, S. B.

2000-01-01

Laboratory facilities have made great strides in producing large sets of reliable data for X-ray astronomy, which include ionization and recombination cross sections needed for charge balance calculations as well as the atomic data needed for interpreting X-ray line formation. We discuss data from the new generation sources and pay special attention to the LLNL electron beam ion trap experiment, which is unique in its ability to provide direct laboratory access to spectral data under precisely controlled conditions that simulate those found in many astrophysical plasmas. Examples of spectral data obtained in the 1-160 A wavelength range are given illustrating the type of laboratory X-ray data produced in support of such missions as Chandra, X-Ray Multi-Mirror telescope (XMM), Advanced Satellite for Cosmology and Astrophysics (ASCA) and Extreme Ultraviolet Explorer Satellite (EUVE).

Test of an argon cusp plasma for tin LPP power scaling

NASA Astrophysics Data System (ADS)

McGeoch, Malcolm W.

2015-03-01

Scaling the power of the tin droplet laser-produced-plasma (LPP) extreme ultraviolet (EUV) source to 500W has eluded the industry after a decade of effort. In 2014 we proposed [2] a solution: placing the laser-plasma interaction region within an argon plasma in a magnetic cusp. This would serve to ionize tin atoms and guide them to a large area annular beam dump. We have since demonstrated the feasibility of this approach. We present first results from a full-scale test plasma at power levels relevant to the generation of at least 200W, showing both that the argon cusp plasma is very stable, and that its geometrical properties are ideal for the transport of exhaust power and tin to the beam dump.

Spacelab

NASA Image and Video Library

1995-03-02

ASTRO-2 was the second dedicated Spacelab mission to conduct astronomical observations in the ultraviolet spectral regions. It consisted of three unique instruments: the Hopkins Ultraviolet Telescope (HUT), the Ultraviolet Imaging Telescope (UIT) and the Wisconsin Ultraviolet Photo-Polorimeter Experiment ((WUPPE). These experiments selected targets from a list of over 600 and observed objects ranging from some inside the solar system to individual stars, nebulae, supernova remnants, galaxies, and active extra galactic objects. This data supplemented data collected on the ASTRO-1 mission flown on the STS-35 mission in December 1990. Because most ultraviolet radiation is absorbed by Earth's atmosphere, it carnot be studied from the ground. The far and extreme ultraviolet regions of the spectrum were largely unexplored before ASTRO-1, but knowledge of all wavelengths is essential to obtain an accurate picture of the universe. ASTRO-2 had almost twice the duration of its predecessor, and a launch at a different time of year allows the telescopes to view different portions of the sky. The mission served to fill in large gaps in astronomers' understanding of the universe and laid the foundations for more discovery in the future. ASTRO-2, a primary payload of STS-67 flight, was launched on March 2, 1995 aboard the Space Shuttle Orbiter Endeavour.

Chang'e 3 and Jade Rabbit's: observations and the landing zone

NASA Astrophysics Data System (ADS)

Ping, Jinsong

Chang’E-3 was launched and landed on the near side of the Moon in December 2013. It is realizing the 2nd phase of Chinese lunar scientific exploration projects. Together with the various in-situ optical observations around the landing sites, the mission carried 4 kinds of radio science experiments, cover the various lunar scientific disciplines as well as lunar surface radio astronomy studies. The key payloads onboard the lander and rover include the near ultraviolet telescope, extreme ultraviolet cameras, ground penetrating radar, very low frequency radio spectrum analyzer, which have not been used in earlier lunar landing missions. Optical spectrometer, Alpha Paticle X-ray spectrometer and Gama Ray spectrometer is also used. The mission is using extreme ultraviolet camera to observe the sun activity and geomagnetic disturbances on geo-space plasma layer of extreme ultraviolet radiation, studying space weather in the plasma layer role in the process; the mission also carries the first time lunar base optical astronomical observations. Most importantly, the topography, landforms and geological structure has been explored in detail. Additionally, the very precise Earth-Moon radio phase ranging technique was firstly tested and realized in this mission. It may increase the study of lunar dyanmics together with LLR technique. Similar to Luna-Glob landers, together with the VLBI radio beacons, the radio transponders are also set on the Chang’E-3. Transponder will receive the uplink X band radio wave transmitted from the two newly constructed Chinese deep space stations, where the high quality hydrogen maser atomic clocks have been used as local time and frequency standard. Radio science receivers have been developed by updating the multi-channel open loop Doppler receiver developed for VLBI and Doppler tracking in Yinghuo-1 and Phobos-Glob Martian missions. This experiment will improve the study of lunar dynamics, by means of measuring the lunar physical liberations precisely together with LLR data.

SUMER: Solar Ultraviolet Measurements of Emitted Radiation

NASA Technical Reports Server (NTRS)

Wilhelm, K.; Axford, W. I.; Curdt, W.; Gabriel, A. H.; Grewing, M.; Huber, M. C. E.; Jordan, S. D.; Kuehne, M.; Lemaire, P.; Marsch, E.

1992-01-01

The experiment Solar Ultraviolet Measurements of Emitted Radiation (SUMER) is designed for the investigations of plasma flow characteristics, turbulence and wave motions, plasma densities and temperatures, structures and events associated with solar magnetic activity in the chromosphere, the transition zone and the corona. Specifically, SUMER will measure profiles and intensities of Extreme Ultraviolet (EUV) lines emitted in the solar atmosphere ranging from the upper chromosphere to the lower corona; determine line broadenings, spectral positions and Doppler shifts with high accuracy, provide stigmatic images of selected areas of the Sun in the EUV with high spatial, temporal and spectral resolution and obtain full images of the Sun and the inner corona in selectable EUV lines, corresponding to a temperature from 10,000 to more than 1,800,000 K.

Radial and azimuthal distribution of Io's oxygen neutral cloud observed by Hisaki/EXCEED

NASA Astrophysics Data System (ADS)

Koga, R.; Tsuchiya, F.; Kagitani, M.; Sakanoi, T.; Yoneda, M.; Yoshikawa, I.; Yoshioka, K.; Murakami, G.; Yamazaki, A.; Kimura, T.; Smith, H. T.

2017-12-01

We report the spatial distributions of oxygen neural cloud surrounding Jupiter's moon Io and along Io's orbit observed by the HISAKI satellite. Atomic oxygen and sulfur in Io's atmosphere escape from the exobase and move to corona (< 5.8 Io radii, the boundary where Jupiter's gravity begins to dominate) and neutral clouds (> 5.8 Io radii) mainly due to atmospheric sputtering. Io plasma torus is formed by ionization of these atoms by electron impact and charge exchange processes. It is essential to examine the dominant source of Io plasma torus, particularly in the vicinity of Io (<5.8 Io radii; atmosphere and corona) or the region away from Io (>5.8 Io radii; extended neutral clouds). The spatial distribution of oxygen and sulfur neutral clouds is important to understand the source. The extreme ultraviolet spectrometer called EXCEED (Extreme Ultraviolet Spectroscope for Exospheric Dynamics) installed on the Hisaki satellite observed Io plasma torus continuously in 2014-2015, and we carried out the monitoring of the distribution of atomic oxygen emission at 130.4 nm. The emission averaged over the distance range of 4.5-6.5 Jovian radii on the dawn and dusk sides strongly depends on the Io phase angle (IPA), and has a emission peak between IPA of 60-90 degrees on the dawn side, and between 240-270 degrees on the dusk side, respectively. It also shows the asymmetry with respect to Io's position: the intensity averaged for IPA 60-90 degrees (13.3 Rayleighs (R)) is 1.2 times greater than that for IPA 90-120 degrees (11.1 R) on the dawn side. The similar tendency is found on the dusk side. Weak atomic oxygen emission (4 R) uniformly distributes in every IPA. We also examined the radial distribution of the oxygen neutral cloud during the same period and found the emission peak near Io's orbit with decreasing the intensity toward 8.0 Jupiter radii. The results show the high density component of the oxygen neutral cloud is concentrated around Io and extends mainly toward leading side of Io. In addition, the low density neutrals uniformly exist along Io's orbit. Both components extend radially outward up to 8 Jovian radii with decreasing the density. In the presentation, we give the estimation of spatial distribution of oxygen neutral density and the oxygen ion source rate in the Io plasma torus.

Ultraviolet spectra of extreme nearby star-forming regions - approaching a local reference sample for JWST

NASA Astrophysics Data System (ADS)

Senchyna, Peter; Stark, Daniel P.; Vidal-García, Alba; Chevallard, Jacopo; Charlot, Stéphane; Mainali, Ramesh; Jones, Tucker; Wofford, Aida; Feltre, Anna; Gutkin, Julia

2017-12-01

Nearby dwarf galaxies provide a unique laboratory in which to test stellar population models below Z⊙/2. Such tests are particularly important for interpreting the surprising high-ionization ultraviolet (UV) line emission detected at z > 6 in recent years. We present HST/COS UV spectra of 10 nearby metal-poor star-forming galaxies selected to show He II emission in SDSS optical spectra. The targets span nearly a dex in gas-phase oxygen abundance (7.8 < 12 + log O/H < 8.5) and present uniformly large specific star formation rates (sSFR ∼102 Gyr-1). The UV spectra confirm that metal-poor stellar populations can power extreme nebular emission in high-ionization UV lines, reaching C III] equivalent widths comparable to those seen in systems at z ∼ 6-7. Our data reveal a marked transition in UV spectral properties with decreasing metallicity, with systems below 12 + log O/H ≲ 8.0 (Z/Z⊙ ≲ 1/5) presenting minimal stellar wind features and prominent nebular emission in He II and C IV. This is consistent with nearly an order of magnitude increase in ionizing photon production beyond the He+-ionizing edge relative to H-ionizing flux as metallicity decreases below a fifth solar, well in excess of standard stellar population synthesis predictions. Our results suggest that often-neglected sources of energetic radiation such as stripped binary products and very massive O-stars produce a sharper change in the ionizing spectrum with decreasing metallicity than expected. Consequently, nebular emission in C IV and He II powered by these stars may provide useful metallicity constraints in the reionization era.

The Inherent Visible Light Signature of an Intense Underwater Ultraviolet Light Source Due to Combined Raman and Fluorescence Effects

DTIC Science & Technology

2000-01-01

Humans cannot see ultraviolet light. The blue-sensitive cones in the retina would respond weakly to ultraviolet wavelengths if exposed to them, but...545, 1992. 3. C. S. Yentsch, and D. A. Phinney, " Autofluorescence and Raman scattering in the marine underwater environment," Ocean Optics X, SPIE

Web-Resources for Astronomical Data in the Ultraviolet

NASA Astrophysics Data System (ADS)

Sachkov, M. E.; Malkov, O. Yu.

2017-12-01

In this paper we describe databases of space projects that are operating or have operated in the ultraviolet spectral region. We give brief descriptions and links to major sources for UV data on the web: archives, space mission sites, databases, catalogues. We pay special attention to the World Space Observatory—Ultraviolet mission that will be launched in 2021.

Transverse Coherence Limited Coherent Diffraction Imaging using a Molybdenum Soft X-ray Laser Pumped at Moderate Pump Energies.

PubMed

Zürch, M; Jung, R; Späth, C; Tümmler, J; Guggenmos, A; Attwood, D; Kleineberg, U; Stiel, H; Spielmann, C

2017-07-13

Coherent diffraction imaging (CDI) in the extreme ultraviolet has become an important tool for nanoscale investigations. Laser-driven high harmonic generation (HHG) sources allow for lab scale applications such as cancer cell classification and phase-resolved surface studies. HHG sources exhibit excellent coherence but limited photon flux due poor conversion efficiency. In contrast, table-top soft X-ray lasers (SXRL) feature excellent temporal coherence and extraordinary high flux at limited transverse coherence. Here, the performance of a SXRL pumped at moderate pump energies is evaluated for CDI and compared to a HHG source. For CDI, a lower bound for the required mutual coherence factor of |μ 12 | ≥ 0.75 is found by comparing a reconstruction with fixed support to a conventional characterization using double slits. A comparison of the captured diffraction signals suggests that SXRLs have the potential for imaging micron scale objects with sub-20 nm resolution in orders of magnitude shorter integration time compared to a conventional HHG source. Here, the low transverse coherence diameter limits the resolution to approximately 180 nm. The extraordinary high photon flux per laser shot, scalability towards higher repetition rate and capability of seeding with a high harmonic source opens a route for higher performance nanoscale imaging systems based on SXRLs.

Sensivity studies for the Cherenkov Telescope Array

NASA Astrophysics Data System (ADS)

Collado, Tarek Hassan

2015-06-01

Since the creation of the first telescope in the 17th century, every major discovery in astrophysics has been the direct consequence of the development of novel observation techniques, opening new windows in the electromagnetic spectrum. After Karl Jansky discovered serendipitously the first radio source in 1933, Grote Reber built the first parabolic radio telescope in his backyard, planting the seed of a whole new field in astronomy. Similarly, new technologies in the 1950s allowed the establishment of other fields, such as the infrared, ultraviolet or the X-rays. The highest energy end of the electromagnetic spectrum, the γ-ray range, represents the last unexplored window for astronomers and should reveal the most extreme phenomena that take place in the Universe. Given the technical complexity of γ-ray detection and the extremely relative low fluxes, γ-ray astronomy has undergone a slower development compared to other wavelengths. Nowadays, the great success of consecutive space missions together with the development and refinement of new detection techniques from the ground, has allowed outstanding scientific results and has brought gamma-ray astronomy to a worthy level in par with other astronomy fields. This work is devoted to the study and improvement of the future Cherenkov Telescope Array (CTA), the next generation of ground based γ-ray detectors, designed to observe photons with the highest energies ever observed from cosmic sources.

Electrode configuration for extreme-UV electrical discharge source

DOEpatents

Spence, Paul Andrew; Fornaciari, Neal Robert; Chang, Jim Jihchyun

2002-01-01

It has been demonstrated that debris generation within an electric capillary discharge source, for generating extreme ultraviolet and soft x-ray, is dependent on the magnitude and profile of the electric field that is established along the surfaces of the electrodes. An electrode shape that results in uniform electric field strength along its surface has been developed to minimize sputtering and debris generation. The electric discharge plasma source includes: (a) a body that defines a circular capillary bore that has a proximal end and a distal end; (b) a back electrode positioned around and adjacent to the distal end of the capillary bore wherein the back electrode has a channel that is in communication with the distal end and that is defined by a non-uniform inner surface which exhibits a first region which is convex, a second region which is concave, and a third region which is convex wherein the regions are viewed outwardly from the inner surface of the channel that is adjacent the distal end of the capillary bore so that the first region is closest to the distal end; (c) a front electrode positioned around and adjacent to the proximal end of the capillary bore wherein the front electrode has an opening that is communication with the proximal end and that is defined by a non-uniform inner surface which exhibits a first region which is convex, a second region which is substantially linear, and third region which is convex wherein the regions are viewed outwardly from the inner surface of the opening that is adjacent the proximal end of the capillary bore so that the first region is closest to the proximal end; and (d) a source of electric potential that is connected across the front and back electrodes.

THE FRACTIONAL IONIZATION OF THE WARM NEUTRAL INTERSTELLAR MEDIUM

DOE Office of Scientific and Technical Information (OSTI.GOV)

Jenkins, Edward B., E-mail: ebj@astro.princeton.edu

2013-02-10

When the neutral interstellar medium is exposed to extreme-ultraviolet and soft X-ray radiation, the argon atoms in it are far more susceptible to being ionized than the hydrogen atoms. We make use of this fact to determine the level of ionization in the nearby warm neutral medium. By analyzing Far-Ultraviolet Spectroscopic Explorer observations of ultraviolet spectra of 44 hot subdwarf stars a few hundred parsecs away from the Sun, we can compare column densities of Ar I to those of O I, where the relative ionization of oxygen can be used as a proxy for that of hydrogen. The measuredmore » deficiency [Ar I/O I]=-0.427{+-}0.11 dex below the expectation for a fully neutral medium implies that the electron density n(e) Almost-Equal-To 0.04 cm{sup -3} if n(H) = 0.5 cm{sup -3}. This amount of ionization is considerably larger than what we expect from primary photoionizations resulting from cosmic rays, the diffuse X-ray background, and X-ray emitting sources within the medium, along with the additional ionizations caused by energetic secondary photoelectrons, Auger electrons, and photons from helium recombinations. We favor an explanation that bursts of radiation created by previous, nearby supernova remnants that have faded by now may have elevated the ionization, and the gas has not yet recombined to a quiescent level. A different alternative is that the low-energy portion of the soft X-ray background is poorly shielded by the H I because it is frothy and has internal pockets of very hot, X-ray emitting gases.« less

Locking the waveform with a quartz crystal

NASA Astrophysics Data System (ADS)

Ghimire, Shambhu

2018-05-01

High-order harmonics in the extreme-ultraviolet regime can be produced and a stable waveform-locked attosecond pulse can be formed when quartz is excited by a strong short-pulsed laser, providing a robust path towards attosecond photonics.

Characterization of extreme ultraviolet laser ablation mass spectrometry for actinide trace analysis and nanoscale isotopic imaging

DOE Office of Scientific and Technical Information (OSTI.GOV)

Green, Tyler; Kuznetsov, Ilya; Willingham, David

The purpose of this research was to characterize Extreme Ultraviolet Time-of-Flight (EUV TOF) Laser Ablation Mass Spectrometry for high spatial resolution elemental and isotopic analysis. We compare EUV TOF results with Secondary Ionization Mass Spectrometry (SIMS) to orient the EUV TOF method within the overall field of analytical mass spectrometry. Using the well-characterized NIST 61x glasses, we show that the EUV ionization approach produces relatively few molecular ion interferences in comparison to TOF SIMS. We demonstrate that the ratio of element ion to element oxide ion is adjustable with EUV laser pulse energy and that the EUV TOF instrument hasmore » a sample utilization efficiency of 0.014%. The EUV TOF system also achieves a lateral resolution of 80 nm and we demonstrate this lateral resolution with isotopic imaging of closely spaced particles or uranium isotopic standard materials.« less

The solar flare extreme ultraviolet to hard X-ray ratio

NASA Technical Reports Server (NTRS)

Mcclymont, A. N.; Canfield, R. C.

1986-01-01

Simultaneous measurements of the peak 10-1030 A extreme ultraviolet (EUV) flux enhancement and more than 10 keV hard X-ray (HXR) peak flux of many solar flare bursts, ranging over about four orders of magnitude in HXR intensity, are studied. A real departure from linearity is found in the relationship between the peak EUV and HXR fluxes in impulsive flare bursts. This relationship is well described by a given power law. Comparison of the predictions of the impulsive nonthermal thick-target electron beam model with observations shows that the model satisfactorily predicts the observed time differences between the HXR and EUV peaks and explains the data very well under given specific assumptions. It is concluded that the high-energy fluxes implied by the invariant area thick-target model cannot be completely ruled out, while the invariant area model with smaller low cutoff requires impossibly large beam densities. A later alternative thick-target model is suggested.

Three-dimensional nanoscale molecular imaging by extreme ultraviolet laser ablation mass spectrometry

PubMed Central

Kuznetsov, Ilya; Filevich, Jorge; Dong, Feng; Woolston, Mark; Chao, Weilun; Anderson, Erik H.; Bernstein, Elliot R.; Crick, Dean C.; Rocca, Jorge J.; Menoni, Carmen S.

2015-01-01

Analytical probes capable of mapping molecular composition at the nanoscale are of critical importance to materials research, biology and medicine. Mass spectral imaging makes it possible to visualize the spatial organization of multiple molecular components at a sample's surface. However, it is challenging for mass spectral imaging to map molecular composition in three dimensions (3D) with submicron resolution. Here we describe a mass spectral imaging method that exploits the high 3D localization of absorbed extreme ultraviolet laser light and its fundamentally distinct interaction with matter to determine molecular composition from a volume as small as 50 zl in a single laser shot. Molecular imaging with a lateral resolution of 75 nm and a depth resolution of 20 nm is demonstrated. These results open opportunities to visualize chemical composition and chemical changes in 3D at the nanoscale. PMID:25903827

Isolation of Coherent Synchrotron Emission During Relativistic Laser Plasma Interactions

NASA Astrophysics Data System (ADS)

Dromey, B.; Rykovanov, S. G.; Lewis, C. L. S.; Zepf, M.

Coherent Synchrotron Emission (CSE) from relativistic laser plasmas (Pukhov et al., Plas Phys Control Fusion 52:124039, 2010; Dromey et al., Nat Phys 8:804-808, 2012; Dromey et al., New J Phys 15:015025, 2013) has recently been identified as a unique platform for the generation of coherent extreme ultraviolet (XUV) and X-Ray radiation with clear potential for bright attosecond pulse production. Exploiting this potential requires careful selection of interaction geometry, spectral wavelength range and target characteristics to allow the generation of high fidelity single attosecond pulses. In the laboratory the first step on this road is to study the individual mechanisms driving the emission of coherent extreme ultraviolet and X-Ray radiation during laser solid interactions in isolation. Here we show how interactions can be tailored to permit the unambiguous observation of coherent synchrotron emission (CSE) and the implications of this geometry for the resulting harmonic spectrum over the duration of the interaction.

Extreme Ultraviolet Emission Spectrum of CO_2 Induced by Electron Impact at 200 eV

NASA Technical Reports Server (NTRS)

Kanik, I.; Ajello, J. M.; James, G. K.

1993-01-01

We present the extreme ultraviolet (EUV) emission spectrum of CO_2 induced by electronimpact at 200 eV. There are 36 spectral features which are identified with a resolution of 0.5 nmover the wavelength range of 40 to 125 nm. Absolute emission cross sections were obtained for eachof these features. The EUV emission spectrum induced by electron impact consist of atomicmultiplets of CI,II and OI,II,III as well as CO and CO^+ molecular band systems produced bydissociative excitation. The CI (119.4 nm) multiplet is the strongest feature of CI with a peak crosssection of 3.61 x 10^(-19) cm^2 at 200 eV. The strongest feature of OI in the EUV spectrum is theOI (99.0 nm) multiplet with a peak cross section of 3.59 x 10^(-19) cm^2 at 200 eV.

Extreme Ultraviolet Fractional Orbital Angular Momentum Beams from High Harmonic Generation

PubMed Central

Turpin, Alex; Rego, Laura; Picón, Antonio; San Román, Julio; Hernández-García, Carlos

2017-01-01

We investigate theoretically the generation of extreme-ultraviolet (EUV) beams carrying fractional orbital angular momentum. To this end, we drive high-order harmonic generation with infrared conical refraction (CR) beams. We show that the high-order harmonic beams emitted in the EUV/soft x-ray regime preserve the characteristic signatures of the driving beam, namely ringlike transverse intensity profile and CR-like polarization distribution. As a result, through orbital and spin angular momentum conservation, harmonic beams are emitted with fractional orbital angular momentum, and they can be synthesized into structured attosecond helical beams –or “structured attosecond light springs”– with rotating linear polarization along the azimuth. Our proposal overcomes the state of the art limitations for the generation of light beams far from the visible domain carrying non-integer orbital angular momentum and could be applied in fields such as diffraction imaging, EUV lithography, particle trapping, and super-resolution imaging. PMID:28281655

Ultrafast Spin Crossover in [FeII (bpy)3 ]2+ : Revealing Two Competing Mechanisms by Extreme Ultraviolet Photoemission Spectroscopy.

PubMed

Moguilevski, Alexandre; Wilke, Martin; Grell, Gilbert; Bokarev, Sergey I; Aziz, Saadullah G; Engel, Nicholas; Raheem, Azhr A; Kühn, Oliver; Kiyan, Igor Yu; Aziz, Emad F

2017-03-03

Photoinduced spin-flip in Fe II complexes is an ultrafast phenomenon that has the potential to become an alternative to conventional processing and magnetic storage of information. Following the initial excitation by visible light into the singlet metal-to-ligand charge-transfer state, the electronic transition to the high-spin quintet state may undergo different pathways. Here we apply ultrafast XUV (extreme ultraviolet) photoemission spectroscopy to track the low-to-high spin dynamics in the aqueous iron tris-bipyridine complex, [Fe(bpy) 3 ] 2+ , by monitoring the transient electron density distribution among excited states with femtosecond time resolution. Aided by first-principles calculations, this approach enables us to reveal unambiguously both the sequential and direct de-excitation pathways from singlet to quintet state, with a branching ratio of 4.5:1. © 2017 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.

Method for fabricating an ultra-low expansion mask blank having a crystalline silicon layer

DOEpatents

Cardinale, Gregory F.

2002-01-01

A method for fabricating masks for extreme ultraviolet lithography (EUVL) using Ultra-Low Expansion (ULE) substrates and crystalline silicon. ULE substrates are required for the necessary thermal management in EUVL mask blanks, and defect detection and classification have been obtained using crystalline silicon substrate materials. Thus, this method provides the advantages for both the ULE substrate and the crystalline silicon in an Extreme Ultra-Violet (EUV) mask blank. The method is carried out by bonding a crystalline silicon wafer or member to a ULE wafer or substrate and thinning the silicon to produce a 5-10 .mu.m thick crystalline silicon layer on the surface of the ULE substrate. The thinning of the crystalline silicon may be carried out, for example, by chemical mechanical polishing and if necessary or desired, oxidizing the silicon followed by etching to the desired thickness of the silicon.

Optical proximity correction for anamorphic extreme ultraviolet lithography

NASA Astrophysics Data System (ADS)

Clifford, Chris; Lam, Michael; Raghunathan, Ananthan; Jiang, Fan; Fenger, Germain; Adam, Kostas

2017-10-01

The change from isomorphic to anamorphic optics in high numerical aperture extreme ultraviolet scanners necessitates changes to the mask data preparation flow. The required changes for each step in the mask tape out process are discussed, with a focus on optical proximity correction (OPC). When necessary, solutions to new problems are demonstrated and verified by rigorous simulation. Additions to the OPC model include accounting for anamorphic effects in the optics, mask electromagnetics, and mask manufacturing. The correction algorithm is updated to include awareness of anamorphic mask geometry for mask rule checking. OPC verification through process window conditions is enhanced to test different wafer scale mask error ranges in the horizontal and vertical directions. This work will show that existing models and methods can be updated to support anamorphic optics without major changes. Also, the larger mask size in the Y direction can result in better model accuracy, easier OPC convergence, and designs that are more tolerant to mask errors.

Polarization control of isolated high-harmonic pulses

NASA Astrophysics Data System (ADS)

Huang, Pei-Chi; Hernández-García, Carlos; Huang, Jen-Ting; Huang, Po-Yao; Lu, Chih-Hsuan; Rego, Laura; Hickstein, Daniel D.; Ellis, Jennifer L.; Jaron-Becker, Agnieszka; Becker, Andreas; Yang, Shang-Da; Durfee, Charles G.; Plaja, Luis; Kapteyn, Henry C.; Murnane, Margaret M.; Kung, A. H.; Chen, Ming-Chang

2018-06-01

High-harmonic generation driven by femtosecond lasers makes it possible to capture the fastest dynamics in molecules and materials. However, thus far, the shortest isolated attosecond pulses have only been produced with linear polarization, which limits the range of physics that can be explored. Here, we demonstrate robust polarization control of isolated extreme-ultraviolet pulses by exploiting non-collinear high-harmonic generation driven by two counter-rotating few-cycle laser beams. The circularly polarized supercontinuum is produced at a central photon energy of 33 eV with a transform limit of 190 as and a predicted linear chirp of 330 as. By adjusting the ellipticity of the two counter-rotating driving pulses simultaneously, we control the polarization state of isolated extreme-ultraviolet pulses—from circular through elliptical to linear polarization—without sacrificing conversion efficiency. Access to the purely circularly polarized supercontinuum, combined with full helicity and ellipticity control, paves the way towards attosecond metrology of circular dichroism.

Single-shot spectro-temporal characterization of XUV pulses from a seeded free-electron laser

PubMed Central

De Ninno, Giovanni; Gauthier, David; Mahieu, Benoît; Ribič, Primož Rebernik; Allaria, Enrico; Cinquegrana, Paolo; Danailov, Miltcho Bojanov; Demidovich, Alexander; Ferrari, Eugenio; Giannessi, Luca; Penco, Giuseppe; Sigalotti, Paolo; Stupar, Matija

2015-01-01

Intense ultrashort X-ray pulses produced by modern free-electron lasers (FELs) allow one to probe biological systems, inorganic materials and molecular reaction dynamics with nanoscale spatial and femtoscale temporal resolution. These experiments require the knowledge, and possibly the control, of the spectro-temporal content of individual pulses. FELs relying on seeding have the potential to produce spatially and temporally fully coherent pulses. Here we propose and implement an interferometric method, which allows us to carry out the first complete single-shot spectro-temporal characterization of the pulses, generated by an FEL in the extreme ultraviolet spectral range. Moreover, we provide the first direct evidence of the temporal coherence of a seeded FEL working in the extreme ultraviolet spectral range and show the way to control the light generation process to produce Fourier-limited pulses. Experiments are carried out at the FERMI FEL in Trieste. PMID:26290320

The Dual-channel Extreme Ultraviolet Continuum Experiment: Sounding Rocket EUV Observations of Local B Stars to Determine Their Potential for Supplying Intergalactic Ionizing Radiation

NASA Astrophysics Data System (ADS)

Erickson, Nicholas; Green, James C.; France, Kevin; Stocke, John T.; Nell, Nicholas

2018-06-01

We describe the scientific motivation and technical development of the Dual-channel Extreme Ultraviolet Continuum Experiment (DEUCE). DEUCE is a sounding rocket payload designed to obtain the first flux-calibrated spectra of two nearby B stars in the EUV 650-1150Å bandpass. This measurement will help in understanding the ionizing flux output of hot B stars, calibrating stellar models and commenting on the potential contribution of such stars to reionization. DEUCE consists of a grazing incidence Wolter II telescope, a normal incidence holographic grating, and the largest (8” x 8”) microchannel plate detector ever flown in space, covering the 650-1150Å band in medium and low resolution channels. DEUCE will launch on December 1, 2018 as NASA/CU sounding rocket mission 36.331 UG, observing Epsilon Canis Majoris, a B2 II star.

The diffuse extreme-ultraviolet background - Constraints on hot coronal plasma

NASA Technical Reports Server (NTRS)

Paresce, F.; Stern, R.

1981-01-01

The Apollo-Soyuz data and data reported by Cash et al. (1976) have been reanalyzed in terms of both isothermal models and temperature distribution models. In the latter case, a power-law form is assumed for the relation between emission measure and temperature. A new upper limit on diffuse flux in the 20-73 eV band derived from Apollo-Soyuz observations made in the earth's shadow has been incorporated in the calculation. In the considered investigation the results of the new analysis are presented and the implications for the physical properties of the hot component of the interstellar medium are discussed. The analysis of the Berkeley extreme ultraviolet (EUV) diffuse background measurements using either isothermal or power law temperature distribution models for the emitting plasma indicates excellent qualitative agreement with hard X-ray data that suggest the sun to be immersed in a hot plasma that pervades most of space out to approximately 100 pc.

Solar Arches

NASA Image and Video Library

2017-12-08

The magnetic field lines between a pair of active regions formed a beautiful set of swaying arches, seen in this footage captured by NASA’s Solar Dynamics Observatory on April 24-26, 2017. The arches are traced out by charged particles spinning along the magnetic field lines. These arches, which form a connection between regions of opposite magnetic polarity, are visible in exquisite detail in this wavelength of extreme ultraviolet light. Extreme ultraviolet light is typically invisible to our eyes, but is colorized here in gold. Read more: go.nasa.gov/2pGgYZt NASA image use policy. NASA Goddard Space Flight Center enables NASA’s mission through four scientific endeavors: Earth Science, Heliophysics, Solar System Exploration, and Astrophysics. Goddard plays a leading role in NASA’s accomplishments by contributing compelling scientific knowledge to advance the Agency’s mission. Follow us on Twitter Like us on Facebook Find us on Instagram

Effects of radiation and temperature on gallium nitride (GaN) metal-semiconductor-metal ultraviolet photodetectors

NASA Astrophysics Data System (ADS)

Chiamori, Heather C.; Angadi, Chetan; Suria, Ateeq; Shankar, Ashwin; Hou, Minmin; Bhattacharya, Sharmila; Senesky, Debbie G.

2014-06-01

The development of radiation-hardened, temperature-tolerant materials, sensors and electronics will enable lightweight space sub-systems (reduced packaging requirements) with increased operation lifetimes in extreme harsh environments such as those encountered during space exploration. Gallium nitride (GaN) is a ceramic, semiconductor material stable within high-radiation, high-temperature and chemically corrosive environments due to its wide bandgap (3.4 eV). These material properties can be leveraged for ultraviolet (UV) wavelength photodetection. In this paper, current results of GaN metal-semiconductor-metal (MSM) UV photodetectors behavior after irradiation up to 50 krad and temperatures of 15°C to 150°C is presented. These initial results indicate that GaN-based sensors can provide robust operation within extreme harsh environments. Future directions for GaN-based photodetector technology for down-hole, automotive and space exploration applications are also discussed.

Upper limits to the interstellar radiation field between 775 and 1050 A

NASA Technical Reports Server (NTRS)

Paresce, F.; Bowyer, S.

1976-01-01

A 40-A resolution extreme-ultraviolet spectrometer, sensitive to radiation in the 775-1050 A band, was flown on a Black Brant VC rocket to measure the night sky brightness in this region of the electromagnetic spectrum. A weak signal above background was recorded in most channels as the spectrometer's field of view scanned the sky in the vicinity of the galactic plane from Monoceros to Andromeda. Because the earth's upper atmosphere may produce some radiation in this wavelength region, the possibility cannot be excluded that some or all of the observed signal is terrestrial in origin. However, observational upper limits can be established at the 95-per cent confidence level for the intensity of an extraterrestrial extreme ultraviolet background which ranges from 6 millionths erg/sq cm/s/sr/A at 1050 A to 4 ten-millionths erg/sq cm/s/sr/A at 775 A. These results are consistent with existing theoretical predictions.

Plans for the extreme ultraviolet explorer data base

NASA Technical Reports Server (NTRS)

Marshall, Herman L.; Dobson, Carl A.; Malina, Roger F.; Bowyer, Stuart

1988-01-01

The paper presents an approach for storage and fast access to data that will be obtained by the Extreme Ultraviolet Explorer (EUVE), a satellite payload scheduled for launch in 1991. The EUVE telescopes will be operated remotely from the EUVE Science Operation Center (SOC) located at the University of California, Berkeley. The EUVE science payload consists of three scanning telescope carrying out an all-sky survey in the 80-800 A spectral region and a Deep Survey/Spectrometer telescope performing a deep survey in the 80-250 A spectral region. Guest Observers will remotely access the EUVE spectrometer database at the SOC. The EUVE database will consist of about 2 X 10 to the 10th bytes of information in a very compact form, very similar to the raw telemetry data. A history file will be built concurrently giving telescope parameters, command history, attitude summaries, engineering summaries, anomalous events, and ephemeris summaries.

Imaging characteristics of the Extreme Ultraviolet Explorer microchannel plate detectors

NASA Technical Reports Server (NTRS)

Vallerga, J. V.; Kaplan, G. C.; Siegmund, O. H. W.; Lampton, M.; Malina, R. F.

1989-01-01

The Extreme Ultraviolet Explorer (EUVE) satellite will conduct an all-sky survey over the wavelength range from 70 A to 760 A using four grazing-incidence telescopes and seven microchannel-plate (MCP) detectors. The imaging photon-counting MCP detectors have active areas of 19.6 cm2. Photon arrival position is determined using a wedge-and-strip anode and associated pulse-encoding electronics. The imaging characteristics of the EUVE flight detectors are presented including image distortion, flat-field response, and spatial differential nonlinearity. Also included is a detailed discussion of image distortions due to the detector mechanical assembly, the wedge-and-strip anode, and the electronics. Model predictions of these distortions are compared to preflight calibration images which show distortions less than 1.3 percent rms of the detector diameter of 50 mm before correction. The plans for correcting these residual detector image distortions to less than 0.1 percent rms are also presented.

Contamination control program results from three years of ground operations on the Extreme Ultraviolet Explorer instruments

NASA Technical Reports Server (NTRS)

Ray, David C.; Jelinsky, Sharon; Welsh, Barry Y.; Malina, Roger F.

1990-01-01

A stringent contamination-control plan has been developed for the optical components of the Extreme Ultraviolet Explorer instruments, whose performance in the 80-900 A wavelength range is highly sensitive to particulate and molecular contamination. The contamination-control program has been implemented over the last three years during assembly, test and calibration phases of the instrument. These phases have now been completed and the optics cavities of the instruments have been sealed until deployment in space. Various approaches are discussed which have been used during ground operations to meet optics' contamination goals within the project schedule and budget. The measured optical properties of EUV witness mirrors are also presented which remained with the flight mirrors during ground operations. These were used to track optical degradation due to contamination from the cleanroom and high-vacuum test-chamber environments.

Magnetic loops, downflows, and convection in the solar corona

NASA Technical Reports Server (NTRS)

Foukal, P.

1978-01-01

Optical and extreme-ultraviolet observations of solar loop structures show that flows of cool plasma from condensations near the loop apex are a common property of loops associated with radiations whose maximum temperature is greater than approximately 7000 K and less than approximately 3,000,000 K. It is suggested that the mass balance of these structures indicates reconnection by means of plasma motion across field lines under rather general circumstances (not only after flares). It is shown that the cool material has lower gas pressure than the surrounding coronal medium. The density structure of the bright extreme ultraviolet loops suggests that downflows of cool gas result from isobaric condensation of plasma that is either out of thermal equilibrium with the local energy deposition rate into the corona, or is thermally unstable. The evidence is thought to indicate that magnetic fields act to induce a pattern of forced convection.

Ultraviolet absorption hygrometer

DOEpatents

Gersh, M.E.; Bien, F.; Bernstein, L.S.

1986-12-09

An ultraviolet absorption hygrometer is provided including a source of pulsed ultraviolet radiation for providing radiation in a first wavelength region where water absorbs significantly and in a second proximate wavelength region where water absorbs weakly. Ultraviolet radiation in the first and second regions which has been transmitted through a sample path of atmosphere is detected. The intensity of the radiation transmitted in each of the first and second regions is compared and from this comparison the amount of water in the sample path is determined. 5 figs.

Large area, surface discharge pumped, vacuum ultraviolet light source

DOEpatents

Sze, R.C.; Quigley, G.P.

1996-12-17

Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source is disclosed. A contamination-free VUV light source having a 225 cm{sup 2} emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm{sup 2} at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing. 3 figs.

Exploration of the Characteristics of the Time Variable Component of the Coronal Heating Process

NASA Technical Reports Server (NTRS)

Wagner, William (Technical Monitor); Habbal, Shadia R.

2003-01-01

By coordinating coronal SOHO observations in white light, ultraviolet, extreme ultraviolet, with radio occultation measurements, and complementing these with modeling, two break-throughs were achieved from this funding: (1) The discovery that minor ions are accelerated much faster than protons in the fast solar wind, and (2) that the imprint of coronal density structures is carried outwards from the Sun into the solar wind. Three refereed papers and one invited review, published in the proceedings of the conference, resulted from this funding. A summary of each is given.

Effects of ultraviolet light on Hymenolepis diminuta ova and cysticercoids

DOE Office of Scientific and Technical Information (OSTI.GOV)

McGavock, W.D.; Howard, K.E.

The ova and cysticercoids of Hymenolepis diminuta were exposed to a 2537 A wave length of ultraviolet light for various time periods. Development was extremely impaired in the cysts which had been irradiated for 30 and 60 minutes. When these were administered to the final host no tapeworms developed. From 113 intermediate host beetle larvae fed with irradiated ova, only three cysticercoids were recovered. Development was impaired in both cases and the infective rate of irradiated ova and cysts of the least exposed groups was lower than that of the controls.

VUV and XUV reflectance of optically coated mirrors for selection of high harmonics

DOE PAGES

Larsen, K. A.; Cryan, J. P.; Shivaram, N.; ...

2016-08-08

We report the reflectance, ~1° from normal incidence, of six different mirrors as a function of photon energy, using monochromatic vacuum ultraviolet (VUV) and extreme ultraviolet (XUV) radiation with energies between 7.5 eV and 24.5 eV. The mirrors examined included both single and multilayer optical coatings, as well as an uncoated substrate. Furthermore, we discuss the performance of each mirror, paying particular attention to the potential application of suppression and selection of high-order harmonics of a Ti:sapphire laser.

The Definition Study for Implementation of the IMAP Mission

NASA Technical Reports Server (NTRS)

Frank, L. A.

1997-01-01

The Small Explorer Mission in intended to provide the first global visualization of Earth's inner magnetosphere. IMAP promises to greatly advance our knowledge of the global distributions and dynamics of near-Earth radiation environment by obtaining first simultaneous images of the plasmasphere at extreme ultraviolet wavelengths, of the extraterrestrial ring current and the earthward portions of the plasma sheet as seen in their emissions of neutral atoms from charge exchange of plasma hot ions with geocoronal hydrogen atoms, and of the aurora in its far-ultraviolet emissions.

Note: Hollow cathode lamp with integral, high optical efficiency isolation valve: a modular vacuum ultraviolet source.

PubMed

Roberts, F Sloan; Anderson, Scott L

2013-12-01

The design and operating conditions of a hollow cathode discharge lamp for the generation of vacuum ultraviolet radiation, suitable for ultrahigh vacuum (UHV) application, are described in detail. The design is easily constructed, and modular, allowing it to be adapted to different experimental requirements. A thin isolation valve is built into one of the differential pumping stages, isolating the discharge section from the UHV section, both for vacuum safety and to allow lamp maintenance without venting the UHV chamber. The lamp has been used both for ultraviolet photoelectron spectroscopy of surfaces and as a "soft" photoionization source for gas-phase mass spectrometry.

Evaluation of miniature vacuum ultraviolet lamps for stability and operating characteristics, Lyman-Alpha task

NASA Technical Reports Server (NTRS)

Hurd, W. A.

1985-01-01

Modifications required to change the near ultraviolet source in the Optical Contamination Monitor to a source with output at or near the Lyman-Alpha hydrogen line are discussed. The effort consisted of selecting, acquiring and testing candidate miniature ultraviolet lamps with significant output in or near 121.6 nm. The effort also included selection of a miniature dc high-voltage power supply capable of operating the lamp. The power supply was required to operate from available primary power supplied by the Optical Effect Module (DEM) and it should be flight qualified or have the ability to be qualified by the user.

Concept Study Report: Extreme-Ultraviolet Imaging Spectrometer Solar-B

NASA Technical Reports Server (NTRS)

Doschek, George, A.; Brown, Charles M.; Davila, Joseph M.; Dere, Kenneth P.; Korendyke, Clarence M.; Mariska, John T.; Seely, John F.

1999-01-01

We propose a next generation Extreme-ultraviolet Imaging Spectrometer (EIS) that for the first time combines high spectral, spatial, and temporal resolution in a single solar spectroscopic instrument. The instrument consists of a multilayer-coated off-axis telescope mirror and a multilayer-coated grating spectrometer. The telescope mirror forms solar images on the spectrometer entrance slit assembly. The spectrometer forms stigmatic spectra of the solar region located at the slit. This region is selected by the articulated telescope mirror. Monochromatic images are obtained either by rastering the solar region across a narrow entrance slit, or by using a very wide slit (called a slot) in place of the slit. Monochromatic images of the region centered on the slot are obtained in a single exposure. Half of each optic is coated to maximize reflectance at 195 Angstroms; the other half to maximize reflectance at 270 Angstroms. The two Extreme Ultraviolet (EUV) wavelength bands have been selected to maximize spectral and dynamical and plasma diagnostic capabilities. Spectral lines are observed that are formed over a temperature range from about 0.1 MK to about 20 MK. The main EIS instrument characteristics are: wavelength bands - 180 to 204 Angstroms; 250 to 290 Angstroms; spectral resolution - 0.0223 Angstroms/pixel (34.3km/s at 195 Angstroms and 23.6 km/s at 284 Angstroms); slit dimensions - 4 slits, two currently specified dimensions are 1" x 1024" and 50" x 1024" (the slot); largest spatial field of view in a single exposure - 50" x 1024"; highest time resolution for active region velocity studies - 4.4 s.

Modelling and Display of the Ultraviolet Sky

NASA Astrophysics Data System (ADS)

Daniels, J.; Henry, R.; Murthy, J.; Allen, M.; McGlynn, T. A.; Scollick, K.

1994-12-01

A computer program is currently under development to model in 3D - one dimension of which is wavelength - all the known and major speculated sources of ultraviolet (900 A - 3100 A ) radiation over the celestial sphere. The software is being written in Fortran 77 and IDL and currently operates under IRIX (the operating system of the Silicon Graphics Iris Machine); all output models are in FITS format. Models along with display software will become available to the astronomical community. The Ultraviolet Sky Model currently includes the Zodiacal Light, Point Sources of Emission, and the Diffuse Galactic Light. The Ultraviolet Sky Model is currently displayed using SkyView: a package under development at NASA/ GSFC, which allows users to retrieve and display publically available all-sky astronomical survey data (covering many wavebands) over the Internet. We present a demonstration of the SkyView display of the Ultraviolet Model. The modelling is a five year development project: the work illustrated here represents product output at the end of year one. Future work includes enhancements to the current models and incorporation of the following models: Galactic Molecular Hydrogen Fluorescence; Galactic Highly Ionized Atomic Line Emission; Integrated Extragalactic Light; and speculated sources in the intergalactic medium such as Ionized Plasma and radiation from Non-Baryonic Particle Decay. We also present a poster which summarizes the components of the Ultraviolet Sky Model and outlines a further package that will be used to display the Ultraviolet Model. This work is supported by United States Air Force Contract F19628-93-K-0004. Dr J. Daniels is supported with a post-doctoral Fellowship from the Leverhulme Foundation, London, United Kingdom. We are also grateful for the encouragement of Dr Stephen Price (Phillips Laboratory, Hanscomb Air Force Base, MA)

PHOTOACTIVATED TOXICITY IN AQUATIC ENVIRONMENTS

EPA Science Inventory

Most aquatic organisms have evolved mechanisms to minimize damage by ultraviolet (UV) radiation. Many terrestrial species have additionally had to adapt to plant compounds (e.g. furanocoumarins) that are extremely toxic when activated by UV radiation. Over evolutionary time, it i...

Probing the infrared counterparts of diffuse far-ultraviolet sources in the Galaxy

NASA Astrophysics Data System (ADS)

Saikia, Gautam; Shalima, P.; Gogoi, Rupjyoti; Pathak, Amit

2017-12-01

Recent availability of high quality infrared (IR) data for diffuse regions in the Galaxy and external galaxies have added to our understanding of interstellar dust. A comparison of ultraviolet (UV) and IR observations may be used to estimate absorption, scattering and thermal emission from interstellar dust. In this paper, we report IR and UV observations for selective diffuse sources in the Galaxy. Using archival mid-infrared (MIR) and far-infrared (FIR) observations from Spitzer Space Telescope, we look for counterparts of diffuse far-ultraviolet (FUV) sources observed by the Voyager, Far Ultraviolet Spectroscopic Explorer (FUSE) and Galaxy Evolution Explorer (GALEX) telescopes in the Galaxy. IR emission features at 8 μm are generally attributed to Polycyclic Aromatic Hydrocarbon (PAH) molecules, while emission at 24 μm are attributed to Very Small Grains (VSGs). The data presented here is unique and our study tries to establish a relation between various dust populations. By studying the FUV-IR correlations separately at low and high latitude locations, we have identified the grain component responsible for the diffuse FUV emission.

Near-simultaneous ultraviolet and optical spectrophotometry of T Tauri stars

NASA Technical Reports Server (NTRS)

Goodrich, Robert W.; Herbig, G. H.

1986-01-01

A set of near-simultaneous ultraviolet and optical spectra and UBVR(J)I(J) photometry of five T Tauri stars has been analyzed for the shape of the energy distribution shortward of 3000 A. The far-ultraviolet continua of these stars are very much stronger than the level of light scattered from longer wavelengths in the IUE spectrograph. The results, expressed as two-color plots, show that the UV colors of T Tauri stars differ significantly from those expected from their optical spectral types. Although these particular K-type T Tauri stars are not extreme members of the class, they have the UV colors of A stars. The spectral shape of this UV excess is approximately that expected from published chromospheric models of T Tauri stars.

Probing of Hermean Exosphere by ultraviolet spectroscopy: Instrument presentation, calibration philosophy and first lights results

NASA Astrophysics Data System (ADS)

Mariscal, J. F.; Rouanet, N.; Maria, J. L.; Quémerais, E.; Mine, P. O.; Zuppella, P.; Suman, M.; Nicolosi, P.; Pelizzo, M. G.; Yoshikawa, I.; Yoshioka, K.; Murakami, G.

2017-11-01

PHEBUS (Probing of Hermean Exosphere by Ultraviolet Spectroscopy) is a double spectrometer for the Extreme Ultraviolet range (55-155 nm) and the Far Ultraviolet range (145-315 nm) dedicated to the characterization of Mercury's exosphere composition and dynamics, and surface-exosphere connections. PHEBUS is part of the ESA BepiColombo cornerstone mission payload devoted to the study of Mercury. The BepiColombo mission consists of two spacecrafts: the Mercury Magnetospheric Orbiter (MMO) and the Mercury Planetary Orbiter (MPO) on which PHEBUS will be mounted. PHEBUS is a French-led instrument implemented in a cooperative scheme involving Japan (detectors), Russia (scanner) and Italy (ground calibration). Before launch, PHEBUS team want to perform a full absolute calibration on ground, in addition to calibrations which will be made in-flight, in order to know the instrument's response as precisely as possible. Instrument overview and calibration philosophy are introduced along with the first lights results observed by a first prototype.

Prediction of Coral Bleaching in the Florida Keys Using Remotely Sensed Data

EPA Science Inventory

Coral bleaching has been attributed to extremes or stressful synergy in several physical variables of the coral habitat. Of particular concern have been temperature, ultraviolet radiation, and photosynthetically available radiation. Satellite observing systems allow synoptic-sca...

NASA Space Astronomy Update 6: Unconventional Windows on the Universe

NASA Technical Reports Server (NTRS)

1992-01-01

Professor Stu Bowyer (University of California at Berkeley) explains the Extreme Ultraviolet Explorer and its telescope in this video. Both instrument and satellite are kept in perfect working condition. The satellite picks up extra galactic objects outside our galaxy.

Nearly amorphous Mo-N gratings for ultimate resolution in extreme ultraviolet interference lithography.

PubMed

Wang, L; Kirk, E; Wäckerlin, C; Schneider, C W; Hojeij, M; Gobrecht, J; Ekinci, Y

2014-06-13

We present fabrication and characterization of high-resolution and nearly amorphous Mo1 - xNx transmission gratings and their use as masks for extreme ultraviolet (EUV) interference lithography. During sputter deposition of Mo, nitrogen is incorporated into the film by addition of N2 to the Ar sputter gas, leading to suppression of Mo grain growth and resulting in smooth and homogeneous thin films with a negligible grain size. The obtained Mo0.8N0.2 thin films, as determined by x-ray photoelectron spectroscopy, are characterized to be nearly amorphous using x-ray diffraction. We demonstrate a greatly reduced Mo0.8N0.2 grating line edge roughness compared with pure Mo grating structures after e-beam lithography and plasma dry etching. The amorphous Mo0.8N0.2 thin films retain, to a large extent, the benefits of Mo as a phase grating material for EUV wavelengths, providing great advantages for fabrication of highly efficient diffraction gratings with extremely low roughness. Using these grating masks, well-resolved dense lines down to 8 nm half-pitch are fabricated with EUV interference lithography.

Absolute calibration of a hydrogen discharge lamp in the vacuum ultraviolet

NASA Technical Reports Server (NTRS)

Nealy, J. E.

1975-01-01

A low-pressure hydrogen discharge lamp was calibrated for radiant intensity in the vacuum ultraviolet spectral region on an absolute basis and was employed as a laboratory standard source in spectrograph calibrations. This calibration was accomplished through the use of a standard photodiode detector obtained from the National Bureau of Standards together with onsite measurements of spectral properties of optical components used. The stability of the light source for use in the calibration of vacuum ultraviolet spectrographs and optical systems was investigated and found to be amenable to laboratory applications. The lamp was studied for a range of operating parameters; the results indicate that with appropriate peripheral instrumentation, the light source can be used as a secondary laboratory standard source when operated under preset controlled conditions. Absolute intensity measurements were recorded for the wavelengths 127.7, 158.0, 177.5, and 195.0 nm for a time period of over 1 month, and the measurements were found to be repeatable to within 11 percent.

It's Not a Bird or a Plane

NASA Technical Reports Server (NTRS)

2005-01-01

Galaxies aren't the only objects filling up the view of NASA's Galaxy Evolution Explorer. Since its launch in 2003, the space telescope -- originally designed to observe galaxies across the universe in ultraviolet light -- has discovered a festive sky blinking with flaring and erupting stars, as well as streaking asteroids, satellites and space debris. One such streaking object -- possibly an Earth-orbiting satellite -- can be seen here flying across the telescope's sight in this sped-up movie.

This probable satellite appears during the last 5 minutes of a 13.5-minute observation. It looks elongated because each picture frame containing the moving object is 19 seconds long. Faint ghost images on either side of the source are detector artifacts caused by the object's extreme brightness.

These bonus objects are being collected in to public catalogues for other astronomers to study.

The EUV spectrophotometer on Atmosphere Explorer.

NASA Technical Reports Server (NTRS)

Hinteregger, H. E.; Bedo, D. E.; Manson, J. E.

1973-01-01

An extreme ultraviolet (EUV) spectrophotometer for measurements of solar radiation at wavelengths ranging from 140 to 1850 A will be included in the payload of each of the three Atmosphere-Explorer (AE) missions, AE-C, -D, and -E. The instrument consists of 24 grating monochromators, 12 of which can be telecommanded either to execute 128-step scans each covering a relatively small section of the total spectrophotometer wavelength range or to maintain fixed (command-selected) wavelength positions. The remaining 12 nonscan monochromators operate at permanently fixed wavelengths and view only a small fraction of the solar disk except for one viewing the whole sun in H Lyman alpha. Ten of the 12 scan-capable monochromators also view the entire solar disk since their primary function is to measure the total fluxes independent of the distribution of sources across the solar disk.

The novel top-coat material for RLS trade-off reduction in EUVL

NASA Astrophysics Data System (ADS)

Onishi, Ryuji; Sakamoto, Rikimaru; Fujitani, Noriaki; Endo, Takafumi; Ho, Bang-ching

2012-03-01

For the next generation lithography (NGL), several technologies have been proposed to achieve the 22nm-node devices and beyond. Extreme ultraviolet (EUV) lithography is one of the candidates for the next generation lithography. In EUV light source development, low power is one of the critical issue because of the low throughput, and another issue is Out of Band (OoB) light existing in EUV light. OoB is concerned to be the cause of deterioration for the lithography performance. In order to avoid this critical issue, we focused on development of the resist top coat material with OoB absorption property as Out of Band Protection Layer (OBPL). We designed this material having high absorbance around 240nm wavelength and high transmittance for EUV light. And this material aimed to improve sensitivity, resolution and LWR performance.

Quantum optical signatures in strong-field laser physics: Infrared photon counting in high-order-harmonic generation.

PubMed

Gonoskov, I A; Tsatrafyllis, N; Kominis, I K; Tzallas, P

2016-09-07

We analytically describe the strong-field light-electron interaction using a quantized coherent laser state with arbitrary photon number. We obtain a light-electron wave function which is a closed-form solution of the time-dependent Schrödinger equation (TDSE). This wave function provides information about the quantum optical features of the interaction not accessible by semi-classical theories. With this approach we can reveal the quantum optical properties of high harmonic generation (HHG) process in gases by measuring the photon statistics of the transmitted infrared (IR) laser radiation. This work can lead to novel experiments in high-resolution spectroscopy in extreme-ultraviolet (XUV) and attosecond science without the need to measure the XUV light, while it can pave the way for the development of intense non-classical light sources.

Spectroscopy and Photometry of EUVE J1429-38.0:An Eclipsing Magnetic Cataclysmic Variable

NASA Astrophysics Data System (ADS)

Howell, Steve B.; Craig, Nahide; Roberts, Bryce; McGee, Paddy; Sirk, Martin

1997-06-01

EUVE J1429-38.0 was originally discovered as a variable source by the Extreme Ultraviolet Explorer (EUVE) satellite. We present new optical observations which unambiguously confirm this star to be an eclipsing magnetic system with an orbital period of 4() h 46() m. The photometric data are strongly modulated by ellipsoidal variations during low states which allow a system inclination of near 80 degrees to be determined. Our time-resolved optical spectra, which cover only about one-third of the orbital cycle, indicate the clear presence of a gas stream. During high states, EUVE J1429-38.0 shows ~ 1 mag deep eclipses and the apparent formation of a partial accretion disk. EUVE J1429-38.0 presents the observer with properties of both the AM Herculis and the DQ Herculis types of magnetic cataclysmic variable.

Coronal Physics and the Chandra Emission Line Project

NASA Technical Reports Server (NTRS)

Brickhouse, N. S.; Drake, J. J.

2000-01-01

With the launch of the Chandra X-ray Observatory, high resolution X-ray spectroscopy of cosmic sources has begun. Early, deep observations of three stellar coronal sources Capella, Procyon, and HR 1099 are providing not only invaluable calibration data, but also benchmarks for plasma spectral models. These models are needed to interpret data from stellar coronae, galaxies and clusters of galaxies, supernova, remnants and other astrophysical sources. They have been called into question in recent years as problems with understanding low resolution ASCA and moderate resolution Extreme Ultraviolet Explorer Satellite (EUVE) data have arisen. The Emission Line Project is a collaborative effort, to improve the models, with Phase I being the comparison of models with observed spectra of Capella, Procyon, and HR 1099. Goals of these comparisons are (1) to determine and verify accurate and robust diagnostics and (2) to identify and prioritize issues in fundamental spectroscopy which will require further theoretical and/or laboratory work. A critical issue in exploiting the coronal data for these purposes is to understand the extent, to which common simplifying assumptions (coronal equilibrium, negligible optical depth) apply. We will discuss recent, advances in our understanding of stellar coronae, in this context.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Oloff, L.-P., E-mail: oloff@physik.uni-kiel.de; Hanff, K.; Stange, A.

With the advent of ultrashort-pulsed extreme ultraviolet sources, such as free-electron lasers or high-harmonic-generation (HHG) sources, a new research field for photoelectron spectroscopy has opened up in terms of femtosecond time-resolved pump-probe experiments. The impact of the high peak brilliance of these novel sources on photoemission spectra, so-called vacuum space-charge effects caused by the Coulomb interaction among the photoemitted probe electrons, has been studied extensively. However, possible distortions of the energy and momentum distributions of the probe photoelectrons caused by the low photon energy pump pulse due to the nonlinear emission of electrons have not been studied in detail yet.more » Here, we systematically investigate these pump laser-induced space-charge effects in a HHG-based experiment for the test case of highly oriented pyrolytic graphite. Specifically, we determine how the key parameters of the pump pulse—the excitation density, wavelength, spot size, and emitted electron energy distribution—affect the measured time-dependent energy and momentum distributions of the probe photoelectrons. The results are well reproduced by a simple mean-field model, which could open a path for the correction of pump laser-induced space-charge effects and thus toward probing ultrafast electron dynamics in strongly excited materials.« less

Extreme ultraviolet index due to broken clouds at a midlatitude site, Granada (southeastern Spain)

NASA Astrophysics Data System (ADS)

Antón, M.; Piedehierro, A. A.; Alados-Arboledas, L.; Wolfran, E.; Olmo, F. J.

2012-11-01

Cloud cover usually attenuates the ultraviolet (UV) solar radiation but, under certain sky conditions, the clouds may produce an enhancement effect increasing the UV levels at surface. The main objective of this paper is to analyze an extreme UV enhancement episode recorded on 16 June 2009 at Granada (southeastern Spain). This phenomenon was characterized by a quick and intense increase in surface UV radiation under broken cloud fields (5-7 oktas) in which the Sun was surrounded by cumulus clouds (confirmed with sky images). Thus, the UV index (UVI) showed an enhancement of a factor 4 in the course of only 30 min around midday, varying from 2.6 to 10.4 (higher than the corresponding clear-sky UVI value). Additionally, the UVI presented values higher than 10 (extreme erythemal risk) for about 20 min running, with a maximum value around 11.5. The use of an empirical model and the total ozone column (TOC) derived from the Global Ozone Monitoring Experiment (GOME) for the period 1995-2011 showed that the value of UVI ~ 11.5 is substantially larger than the highest index that could origin the natural TOC variations over Granada. Finally, the UV erythemal dose accumulated during the period of 20 min with the extreme UVI values under broken cloud fields was 350 J/m2 which surpass the energy required to produce sunburn of the most human skin types.

Note: Hollow cathode lamp with integral, high optical efficiency isolation valve: A modular vacuum ultraviolet source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sloan Roberts, F.; Anderson, Scott L.

2013-12-15

The design and operating conditions of a hollow cathode discharge lamp for the generation of vacuum ultraviolet radiation, suitable for ultrahigh vacuum (UHV) application, are described in detail. The design is easily constructed, and modular, allowing it to be adapted to different experimental requirements. A thin isolation valve is built into one of the differential pumping stages, isolating the discharge section from the UHV section, both for vacuum safety and to allow lamp maintenance without venting the UHV chamber. The lamp has been used both for ultraviolet photoelectron spectroscopy of surfaces and as a “soft” photoionization source for gas-phase massmore » spectrometry.« less

Ultraviolet properties of individual hot stars in globular cluster cores. 1: NGC 1904 (M 79)

NASA Technical Reports Server (NTRS)

Altner, Bruce; Matilsky, Terry A.

1992-01-01

As part of an observing program using the International Ultraviolet Explorer (IUE) satellite to investigate the ultraviolet properties of stars found within the cores of galactic globular clusters with blue horizontal branches (HBs), we obtained three spectra of the cluster NGC 1904 (M 79). All three were long integration-time, short-wavelength (SWP) spectra obtained at the so called 'center of light' and all three showed evidence of sources within the IUE large aperture (21.4 in. by 10 in.). In this paper we shall describe the analysis of these spectra and present evidence that the UV sources represent individual hot stars in the post-HB stage of evolution.

Modeling and measurement of hydrogen radical densities of in situ plasma-based Sn cleaning source

NASA Astrophysics Data System (ADS)

Elg, Daniel T.; Panici, Gianluca A.; Peck, Jason A.; Srivastava, Shailendra N.; Ruzic, David N.

2017-04-01

Extreme ultraviolet (EUV) lithography sources expel Sn debris. This debris deposits on the collector optic used to focus the EUV light, lowering its reflectivity and EUV throughput to the wafer. Consequently, the collector must be cleaned, causing source downtime. To solve this, a hydrogen plasma source was developed to clean the collector in situ by using the collector as an antenna to create a hydrogen plasma and create H radicals, which etch Sn as SnH4. This technique has been shown to remove Sn from a 300-mm-diameter stainless steel dummy collector. The H radical density is of key importance in Sn etching. The effects of power, pressure, and flow on radical density are explored. A catalytic probe has been used to measure radical density, and a zero-dimensional model is used to provide the fundamental science behind radical creation and predict radical densities. Model predictions and experimental measurements are in good agreement. The trends observed in radical density, contrasted with measured Sn removal rates, show that radical density is not the limiting factor in this etching system; other factors, such as SnH4 redeposition and energetic ion bombardment, must be more fully understood in order to predict removal rates.

Multi-spacecraft Observations of the Coronal and Interplanetary Evolution of a Solar Eruption Associated with Two Active Regions

NASA Astrophysics Data System (ADS)

Hu, H.; Liu, Y. D.; Wang, R.; Zhao, X.; Zhu, B.; Yang, Z.

2017-12-01

We investigate the coronal and interplanetary evolution of a coronal mass ejection (CME) launched on 2010 September 4 from a source region linking two active regions (ARs), 11101 and 11103, using extreme ultraviolet imaging, magnetogram, white-light, and in situ observations from SDO, STEREO, SOHO, VEX, and Wind. A potential-field source-surface model is employed to examine the configuration of the coronal magnetic field surrounding the source region. The graduated cylindrical shell model and a triangulation method are applied to determine the kinematics of the CME in the corona and interplanetary space. From the remote sensing and in situ observations, we obtain some key results: (1) the CME was deflected in both the eastward and southward directions in the low corona by the magnetic pressure from the two ARs, and possibly interacted with another ejection, which caused that the CME arrived at VEX that was longitudinally distant from the source region; (2) although VEX was closer to the Sun, the observed and derived CME arrival times at VEX are not earlier than those at Wind, which suggests the importance of determining both the frontal shape and propagation direction of the CME in interplanetary space; and (3) the ICME was compressed in the radial direction while the longitudinal transverse size was extended.

Performance of 100-W HVM LPP-EUV source

NASA Astrophysics Data System (ADS)

Mizoguchi, Hakaru; Nakarai, Hiroaki; Abe, Tamotsu; Nowak, Krzysztof M.; Kawasuji, Yasufumi; Tanaka, Hiroshi; Watanabe, Yukio; Hori, Tsukasa; Kodama, Takeshi; Shiraishi, Yutaka; Yanagida, Tatsuya; Soumagne, Georg; Yamada, Tsuyoshi; Yamazaki, Taku; Okazaki, Shinji; Saitou, Takashi

2015-08-01

At Gigaphoton Inc., we have developed unique and original technologies for a carbon dioxide laser-produced tin plasma extreme ultraviolet (CO2-Sn-LPP EUV) light source, which is the most promising solution for high-power high-volume manufacturing (HVM) EUV lithography at 13.5 nm. Our unique technologies include the combination of a pulsed CO2 laser with Sn droplets, the application of dual-wavelength laser pulses for Sn droplet conditioning, and subsequent EUV generation and magnetic field mitigation. Theoretical and experimental data have clearly shown the advantage of our proposed strategy. Currently, we are developing the first HVM light source, `GL200E'. This HVM light source will provide 250-W EUV power based on a 20-kW level pulsed CO2 laser. The preparation of a high average-power CO2 laser (more than 20 kW output power) has been completed in cooperation with Mitsubishi Electric Corporation. Recently, we achieved 140 W at 50 kHz and 50% duty cycle operation as well as 2 h of operation at 100 W of power level. Further improvements are ongoing. We will report the latest status and the challenge to reach stable system operation of more than 100 W at about 4% conversion efficiency with 20-μm droplets and magnetic mitigation.

Ultraviolet, visible, and infrared rays

NASA Technical Reports Server (NTRS)

Taylor, J. H.; Letavet, A. A.

1975-01-01

Sources of infrared, visible and ultraviolet radiation are discussed, and important associated biological and psychophysiological effects are described. The problem of protection from excessively high or low levels of radiant energy in these spectral regions is considered and optimal levels are suggested.

JPL Closeup

NASA Technical Reports Server (NTRS)

1983-01-01

Voyager, Infrared Astronomical Satellite, Galileo, Viking, Solar Mesosphere Explorer, Wide-field/Planetary Camera, Venus Mapper, International Solar Polar Mission - Solar Interplanetary Satellite, Extreme Ultraviolet Explores, Starprobe, International Halley Watch, Marine Mark II, Samex, Shuttle Imaging Radar-A, Deep Space Network, Biomedical Technology, Ocean Studies and Robotics are summarized.

Observations of the Magnetic Cataclysmic Variable VV Puppis with the Far Ultraviolet Spectroscopic Explorer

NASA Astrophysics Data System (ADS)

Hoard, D. W.; Szkody, Paula; Ishioka, Ryoko; Ferrario, L.; Gänsicke, B. T.; Schmidt, Gary D.; Kato, Taichi; Uemura, Makoto

2002-10-01

We present the first far-ultraviolet (FUV) observations of the magnetic cataclysmic variable VV Puppis, obtained with the Far Ultraviolet Spectroscopic Explorer satellite. In addition, we have obtained simultaneous ground-based optical photometric observations of VV Pup during part of the FUV observation. The shapes of the FUV and optical light curves are consistent with each other and with those of past observations at optical, extreme-ultraviolet, and X-ray wavelengths. Time-resolved FUV spectra during the portion of VV Pup's orbit when the accreting magnetic pole of the white dwarf can be seen show an increasing continuum level as the accretion spot becomes more directly visible. The most prominent features in the spectrum are the O VI λλ1031.9, 1037.6 emission lines. We interpret the shape and velocity shift of these lines in the context of an origin in the accretion funnel near the white dwarf surface. A blackbody function with Tbb>~90,000 K provides an adequate fit to the FUV spectral energy distribution of VV Pup. Based on observations with the NASA-CNES-CSA Far Ultraviolet Spectroscopic Explorer. FUSE is operated for NASA by Johns Hopkins University under NASA contract NAS 5-32985.

In Charon's Shadow: Analysis of the UV Solar Occultation from New Horizons

NASA Astrophysics Data System (ADS)

Kammer, Joshua A.; Stern, S. A.; Weaver, H. A.; Young, L. A.; Ennico, K. A.; Olkin, C. B.; Gladstone, G. R.; Summers, M. E.; Greathouse, T. K.; Retherford, K. D.; Versteeg, M. H.; Parker, J. W.; Steffl, A. J.; Schindhelm, E.; Strobel, D. F.; Linscott, I. R.; Hinson, D. P.; Tyler, G. L.; Woods, W. W.

2015-11-01

Observations of Charon, Pluto's largest moon, have so far yielded no evidence for a substantial atmosphere. However, during the flyby of New Horizons through the Pluto-Charon system, the Alice ultraviolet spectrograph successfully acquired the most sensitive measurements to date during an occultation of the sun as New Horizons passed through Charon's shadow. These observations include wavelength coverage in the extreme- and far-ultraviolet (EUV and FUV) from 52 nm to 187 nm. We will present these results from Alice, and discuss their implications for an atmosphere on Charon.This work was supported by NASA's New Horizons project.

A Search for Rarely Seen Ultraviolet Coma Emissions and New Species Upper Limits at Comet 67P/Churyumov-Gerasimenko Using the Rosetta-Alice Ultraviolet Spectrograph

NASA Astrophysics Data System (ADS)

Noonan, J.; Stern, S. A.; Parker, J. W.; Keeney, B. A.; Weaver, H. A., Jr.; Feldman, P.; Steffl, A.; Feaga, L. M.; Bertaux, J. L.

2017-12-01

The Alice far/extreme-UV spectrograph aboard Rosetta is one of three US instruments provided by NASA; it is the first UV spectrograph to reach any comet. Numerous scientific results have been obtained regarding 67P/Churyumov-Gerasimenko by this instrument. Here we summarize two new sets of results from a search for rarely appearing atomic and molecular spectral emission features and a grand sum spectrum allowing us to place new atomic and molecular neutral and ionized species upper limits in the comet's coma.

A Long-Term Dissipation of the EUV He ii (30.4 nm) Segmentation in Full-Disk Solar Images

NASA Astrophysics Data System (ADS)

Didkovsky, Leonid

2018-06-01

Some quiet-Sun days observed by the Atmospheric Imaging Assembly (AIA) on-board the Solar Dynamics Observatory (SDO) during the time interval in 2010 - 2017 were used to continue our previous analyses reported by Didkovsky and Gurman ( Solar Phys. 289, 153, 2014a) and Didkovsky, Wieman, and Korogodina ( Solar Phys. 292, 32, 2017). The analysis consists of determining and comparing spatial spectral ratios (spectral densities over some time interval) from spatial (segmentation-cell length) power spectra. The ratios were compared using modeled compatible spatial frequencies for spectra from the Extreme ultraviolet Imaging Telescope (EIT) on-board the Solar and Heliospheric Observatory (SOHO) and from AIA images. With the new AIA data added to the EIT data we analyzed previously, the whole time interval from 1996 to 2017 reported here is approximately the length of two "standard" solar cycles (SC). The spectral ratios of segmentation-cell dimension structures show a significant and steady increase with no detected indication of SC-related returns to the values that characterize the SC minima. This increase in spatial power at high spatial frequencies is interpreted as a dissipation of medium-size EUV network structures to smaller-size structures in the transition region. Each of the latest ratio changes for 2010 through 2017 spectra calculated for a number of consecutive short-term intervals has been converted into monthly mean ratio (MMR) changes. The MMR values demonstrate variable sign and magnitudes, thus confirming the solar nature of the changes. These changes do not follow a "typical" trend of instrumental degradation or a long-term activity profile from the He ii (30.4 nm) irradiance measured by the Extreme ultraviolet Spectrophotometer (ESP) either. The ESP is a channel of the Extreme ultraviolet Variability Experiment (EVE) on-board SDO.

The Extreme Ultraviolet Normal Incidence Spectrograph (EUNIS)

NASA Technical Reports Server (NTRS)

Oegerle, William (Technical Monitor); Rabin, D.; Davila, J.; Thomas, R. J.; Engler, C.; Irish, S.; Keski-Kuha, R.; Novello, J.; Nowak, M.; Payne, L.;

Comparison of Helioseismic Far-Side Active Region Detections with STEREO Far-Side EUV Observations of Solar Activity

NASA Astrophysics Data System (ADS)

Liewer, P. C.; Qiu, J.; Lindsey, C.

2017-10-01

Seismic maps of the Sun's far hemisphere, computed from Doppler data from the Helioseismic and Magnetic Imager (HMI) on board the Solar Dynamics Observatory (SDO) are now being used routinely to detect strong magnetic regions on the far side of the Sun (http://jsoc.stanford.edu/data/farside/). To test the reliability of this technique, the helioseismically inferred active region detections are compared with far-side observations of solar activity from the Solar TErrestrial RElations Observatory (STEREO), using brightness in extreme-ultraviolet light (EUV) as a proxy for magnetic fields. Two approaches are used to analyze nine months of STEREO and HMI data. In the first approach, we determine whether new large east-limb active regions are detected seismically on the far side before they appear Earth side and study how the detectability of these regions relates to their EUV intensity. We find that while there is a range of EUV intensities for which far-side regions may or may not be detected seismically, there appears to be an intensity level above which they are almost always detected and an intensity level below which they are never detected. In the second approach, we analyze concurrent extreme-ultraviolet and helioseismic far-side observations. We find that 100% (22) of the far-side seismic regions correspond to an extreme-ultraviolet plage; 95% of these either became a NOAA-designated magnetic region when reaching the east limb or were one before crossing to the far side. A low but significant correlation is found between the seismic signature strength and the EUV intensity of a far-side region.

A narrow-band injection-seeded pulsed titanium:sapphire oscillator-amplifier system with on-line chirp analysis for high-resolution spectroscopy.

PubMed

Hannemann, S; van Duijn, E-J; Ubachs, W

2007-10-01

A narrow-band tunable injection-seeded pulsed titanium:sapphire laser system has been developed for application in high-resolution spectroscopic studies at the fundamental wavelengths in the near infrared as well as in the ultraviolet, deep ultraviolet, and extreme ultraviolet after upconversion. Special focus is on the quantitative assessment of the frequency characteristics of the oscillator-amplifier system on a pulse-to-pulse basis. Frequency offsets between continuous-wave seed light and the pulsed output are measured as well as linear chirps attributed mainly to mode pulling effects in the oscillator cavity. Operational conditions of the laser are found in which these offset and chirp effects are minimal. Absolute frequency calibration at the megahertz level of accuracy is demonstrated on various atomic and molecular resonance lines.

Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions

NASA Astrophysics Data System (ADS)

Schröder, Sven; Gliech, Stefan; Duparré, Angela

2005-10-01

An instrumentation for total and angle-resolved scattering (ARS) at 193 and 157 nm has been developed at the Fraunhofer Institute in Jena to meet the severe requirements for scattering analysis of deep- and vacuum-ultraviolet optical components. Extremely low backscattering levels of 10^-6 for the total scattering measurements and more than 9 orders of magnitude dynamic range for ARS have been accomplished. Examples of application extend from the control of at-wavelength scattering losses of superpolished substrates with rms roughness as small as 0.1 nm to the detection of volume material scattering and the study into the scattering of multilayer coatings. In addition, software programs were developed to model the roughness-induced light scattering of substrates and thin-film coatings.

Global modeling of thermospheric airglow in the far ultraviolet

NASA Astrophysics Data System (ADS)

Solomon, Stanley C.

2017-07-01

The Global Airglow (GLOW) model has been updated and extended to calculate thermospheric emissions in the far ultraviolet, including sources from daytime photoelectron-driven processes, nighttime recombination radiation, and auroral excitation. It can be run using inputs from empirical models of the neutral atmosphere and ionosphere or from numerical general circulation models of the coupled ionosphere-thermosphere system. It uses a solar flux module, photoelectron generation routine, and the Nagy-Banks two-stream electron transport algorithm to simultaneously handle energetic electron distributions from photon and auroral electron sources. It contains an ion-neutral chemistry module that calculates excited and ionized species densities and the resulting airglow volume emission rates. This paper describes the inputs, algorithms, and code structure of the model and demonstrates example outputs for daytime and auroral cases. Simulations of far ultraviolet emissions by the atomic oxygen doublet at 135.6 nm and the molecular nitrogen Lyman-Birge-Hopfield bands, as viewed from geostationary orbit, are shown, and model calculations are compared to limb-scan observations by the Global Ultraviolet Imager on the TIMED satellite. The GLOW model code is provided to the community through an open-source academic research license.

Continuous-wave deep ultraviolet sources for resonance Raman explosive sensing

NASA Astrophysics Data System (ADS)

Yellampalle, Balakishore; Martin, Robert; Sluch, Mikhail; McCormick, William; Ice, Robert; Lemoff, Brian

2015-05-01

A promising approach to stand-off detection of explosive traces is using resonance Raman spectroscopy with Deepultraviolet (DUV) light. The DUV region offers two main advantages: strong explosive signatures due to resonant and λ- 4 enhancement of Raman cross-section, and lack of fluorescence and solar background. For DUV Raman spectroscopy, continuous-wave (CW) or quasi-CW lasers are preferable to high peak powered pulsed lasers because Raman saturation phenomena and sample damage can be avoided. In this work we present a very compact DUV source that produces greater than 1 mw of CW optical power. The source has high optical-to-optical conversion efficiency, greater than 5 %, as it is based on second harmonic generation (SHG) of a blue/green laser source using a nonlinear crystal placed in an external resonant enhancement cavity. The laser system is extremely compact, lightweight, and can be battery powered. Using two such sources, one each at 236.5 nm and 257.5 nm, we are building a second generation explosive detection system called Dual-Excitation-Wavelength Resonance-Raman Detector (DEWRRED-II). The DEWRRED-II system also includes a compact dual-band high throughput DUV spectrometer, and a highly-sensitive detection algorithm. The DEWRRED technique exploits the DUV excitation wavelength dependence of Raman signal strength, arising from complex interplay of resonant enhancement, self-absorption and laser penetration depth. We show sensor measurements from explosives/precursor materials at different standoff distances.

Low-cost method for producing extreme ultraviolet lithography optics

DOEpatents

Folta, James A [Livermore, CA; Montcalm, Claude [Fort Collins, CO; Taylor, John S [Livermore, CA; Spiller, Eberhard A [Mt. Kisco, NY

2003-11-21

Spherical and non-spherical optical elements produced by standard optical figuring and polishing techniques are extremely expensive. Such surfaces can be cheaply produced by diamond turning; however, the roughness in the diamond turned surface prevent their use for EUV lithography. These ripples are smoothed with a coating of polyimide before applying a 60 period Mo/Si multilayer to reflect a wavelength of 134 .ANG. and have obtained peak reflectivities close to 63%. The savings in cost are about a factor of 100.

The investigation of O and N2 densities from the OSO-7 extreme UV data

NASA Technical Reports Server (NTRS)

1975-01-01

The results of solar radiation observations in the extreme ultra-violet spectrum from 200 A to 600 A made by the OSO-7 Satellite were studied. The results of the influence of attenuation by the atmosphere in the 250 to 500 km altitude range are presented. Using published molecular absorption cross-sections at 304 A and 256 A, the Jaccia atmospheric model is validated, and shows that a mean exospheric of 1050 K is appropriate for the sunset data.

A double-stream Xe:He jet plasma emission in the vicinity of 6.7 nm

NASA Astrophysics Data System (ADS)

Chkhalo, N. I.; Garakhin, S. A.; Golubev, S. V.; Lopatin, A. Ya.; Nechay, A. N.; Pestov, A. E.; Salashchenko, N. N.; Toropov, M. N.; Tsybin, N. N.; Vodopyanov, A. V.; Yulin, S.

2018-05-01

We present the results of investigations of extreme ultraviolet (EUV) light emission in the range from 5 to 10 nm. The light source was a pulsed "double-stream" Xe:He gas jet target irradiated by a laser beam with a power density of ˜1011 W/cm2. The radiation spectra were measured with a Czerny-Turner monochromator with a plane diffraction grating. The conversion efficiency of the laser energy into EUV radiation caused by Xe+14…+16 ion emission in the range of 6-8 nm was measured using a calibrated power meter. The conversion efficiency of the laser radiation into EUV in the vicinity of 6.7 nm was (2.17 ± 0.13)% in a 1 nm spectral band. In the spectral band of the real optical system (0.7% for La/B multilayer mirrors) emitted into the half-space, it was (0.1 ± 0.006)%. The results of this study provide an impetus for further research on laser plasma sources for maskless EUV lithography at a wavelength of 6.7 nm.

Studies on cryogenic Xe capillary jet target for laser-produced plasma EUV-light source

NASA Astrophysics Data System (ADS)

Inoue, T.; Nica, P. E.; Kaku, K.; Shimoura, A.; Amano, S.; Miyamoto, S.; Mochizuki, T.

2006-03-01

In this paper, characterizations of a cryogenic Xe capillary jet target for a laser-produced plasma extreme ultraviolet (EUV) light source are reported. The capillary jet target is a candidate of fast-supplying targets for mitigating debris generation and target consumption in a vacuum chamber without reducing the EUV conversion efficiency. Xe capillary jets (jet velocity ~ 0.4 m/s) were generated in vacuum by using annular nozzles chilled to ~ 170 K at a Xe backing pressure of ~ 0.7 MPa. Forming mechanisms of the capillary jet targets were studied by using numerical calculations. Furthermore, laser-produced plasma EUV generation was performed by irradiating a Nd:YAG laser (1064 nm, ~ 0.5 J, 10 ns, 120 μmφ, ~ 4×10 11 W/cm2) on a Xe capillary jet target (outer / inner diameter = 100 / 70 μmφ). The angular distribution of EUV generation was approximately uniform around the Xe capillary jet target, and the peak kinetic energy of the fast-ions was evaluated to be ~ 2 keV.

Extreme ultraviolet patterning of tin-oxo cages

NASA Astrophysics Data System (ADS)

Haitjema, Jarich; Zhang, Yu; Vockenhuber, Michaela; Kazazis, Dimitrios; Ekinci, Yasin; Brouwer, Albert M.

2017-07-01

We report on the extreme ultraviolet (EUV) patterning performance of tin-oxo cages. These cage molecules were already known to function as a negative tone photoresist for EUV radiation, but in this work, we significantly optimized their performance. Our results show that sensitivity and resolution are only meaningful photoresist parameters if the process conditions are optimized. We focus on contrast curves of the materials using large area EUV exposures and patterning of the cages using EUV interference lithography. It is shown that baking steps, such as postexposure baking, can significantly affect both the sensitivity and contrast in the open-frame experiments as well as the patterning experiments. A layer thickness increase reduced the necessary dose to induce a solubility change but decreased the patterning quality. The patterning experiments were affected by minor changes in processing conditions such as an increased rinsing time. In addition, we show that the anions of the cage can influence the sensitivity and quality of the patterning, probably through their effect on physical properties of the materials.

Direct and simultaneous observation of ultrafast electron and hole dynamics in germanium

DOE PAGES

Zurch, Michael; Chang, Hung -Tzu; Borja, Lauren J.; ...

2017-06-01

Understanding excited carrier dynamics in semiconductors is crucial for the development of photovoltaics and efficient photonic devices. However, overlapping spectral features in optical pump-probe spectroscopy often render assignments of separate electron and hole carrier dynamics ambiguous. Here, ultrafast electron and hole dynamics in germanium nanocrystalline thin films are directly and simultaneously observed by ultrafast transient absorption spectroscopy in the extreme ultraviolet at the germanium M 4,5 edge. We decompose the spectra into contributions of electronic state blocking and photo-induced band shifts at a carrier density of 8 × 10 20 cm –3. Separate electron and hole relaxation times are observedmore » as a function of hot carrier energies. A first-order electron and hole decay of ~1 ps suggests a Shockley–Read–Hall recombination mechanism. Furthermore, the simultaneous observation of electrons and holes with extreme ultraviolet transient absorption spectroscopy paves the way for investigating few- to sub-femtosecond dynamics of both holes and electrons in complex semiconductor materials and across junctions.« less

Contamination control approach for the Extreme Ultraviolet Explorer satellite instrumentation

NASA Technical Reports Server (NTRS)

Mrowka, Stan; Jelinsky, Sharon; Jelinsky, Patrick; Malina, Roger F.

1987-01-01

The Extreme Ultraviolet Explorer will perform an all-sky survey and spectroscopic observations over the wavelength range 80-900A. Hydrocarbon and particulate contamination will potentially affect the throughput and signal to noise ratio of the signal detected by the instruments. A witness sample program is here used to investigate and monitor the effects of specific contaminants on EUV reflectivity. Witness samples were intentionally contaminated with thin layers of pump oil. An oil layer 150 A thick was applied and found to evaporate over 8 hours. The EUV reflectivity and imaging properties were then measured and found to be acceptable for grazing angles between 5 and 30 deg. In a second test, layers 500 A thick were deposited and then allowed to evaporate in vacuum; once the oil had evaporated to at least 350 A, the final sample reflectivity was degraded less than 10 percent, but the image was degraded severely by scattering. An outline of the contamination control program is also presented.

Optical design of a stigmatic spectroheliometer for photometric studies of dynamic phenomena at extreme-ultraviolet wavelengths

NASA Technical Reports Server (NTRS)

Huber, M. C. E.; Timothy, J. G.

1977-01-01

The design of a stigmatic spectroheliometer for photometric studies of dynamic phenomena in the solar atmosphere at extreme ultraviolet (EUV) wavelengths is described. The normal-incidence spectrometer requires only one reflective surface, and is equipped with a series of exit slits and associated one-dimensional detector arrays that are mounted at the secondary (vertical) foci of the concave diffraction grating. It is shown that such a spectrometer mounted at the focus of an off-axis paraboloid telescope mirror of the size employed in the EUV spectroheliometer flown on Skylab could record monochromatic images of a 2 x 2 (arcmin) sq field-of-view with a spatial resolution element of 1 x 1 (arcsec) sq in a time of 4 s, 24 s, or 4 min, depending on whether the region studied is flaring, active, or quiet. The resulting spectroheliograms would have an average photometric precision of 10% and a spectral purity of 0.1 A.

Dose-Rate Effects in Breaking DNA Strands by Short Pulses of Extreme Ultraviolet Radiation.

PubMed

Vyšín, Luděk; Burian, Tomáš; Ukraintsev, Egor; Davídková, Marie; Grisham, Michael E; Heinbuch, Scott; Rocca, Jorge J; Juha, Libor

2018-05-01

In this study, we examined dose-rate effects on strand break formation in plasmid DNA induced by pulsed extreme ultraviolet (XUV) radiation. Dose delivered to the target molecule was controlled by attenuating the incident photon flux using aluminum filters as well as by changing the DNA/buffer-salt ratio in the irradiated sample. Irradiated samples were examined using agarose gel electrophoresis. Yields of single- and double-strand breaks (SSBs and DSBs) were determined as a function of the incident photon fluence. In addition, electrophoresis also revealed DNA cross-linking. Damaged DNA was inspected by means of atomic force microscopy (AFM). Both SSB and DSB yields decreased with dose rate increase. Quantum yields of SSBs at the highest photon fluence were comparable to yields of DSBs found after synchrotron irradiation. The average SSB/DSB ratio decreased only slightly at elevated dose rates. In conclusion, complex and/or clustered damages other than cross-links do not appear to be induced under the radiation conditions applied in this study.