Fabrication of taste sensor for education

NASA Astrophysics Data System (ADS)

Wu, Xiao; Tahara, Yusuke; Toko, Kiyoshi; Kuriyaki, Hisao

2017-03-01

In order to solve the unconcern to usefulness of learning science among high school students in Japan, we developed a simple fabricated taste sensor with sensitivity and selectivity to each taste quality, which can be applied in science class. A commercialized Teflon membrane was used as the polymer membrane holding lipids. In addition, a non-adhesive method is considered to combine the membrane and the sensor electrode using a plastic cap which is easily accessible. The taste sensor for education fabricated in this way showed a good selectivity and sensitivity. By adjusting the composition of trioctylmethylammonium chloride (TOMA) and phosphoric acid di(2-ethylhexyl) ester (PAEE) included in lipid solution, we improved the selectivity of this simple taste sensor to saltiness and sourness. To verify this taste sensor as a useful science teaching material for science class, we applied this taste sensor into a science class for university students. By comparing the results between the sensory test and the sensor response, humans taste showed the same tendency just as the sensor response, which proved the sensor as a useful teaching material for science class.

A patterned ZnO nanorod array/gas sensor fabricated by mechanoelectrospinning-assisted selective growth.

PubMed

Wang, Xiaomei; Sun, Fazhe; Huang, Yongan; Duan, Yongqing; Yin, Zhouping

2015-02-21

Micropatterned ZnO nanorod arrays were fabricated by the mechanoelectrospinning-assisted direct-writing process and the hydrothermal growth process, and utilized as gas sensors that exhibited excellent Ohmic behavior and sensitivity response to oxidizing gas NO2 at low concentrations (1-100 ppm).

Wearable carbon nanotube-based fabric sensors for monitoring human physiological performance

NASA Astrophysics Data System (ADS)

Wang, Long; Loh, Kenneth J.

2017-05-01

A target application of wearable sensors is to detect human motion and to monitor physical activity for improving athletic performance and for delivering better physical therapy. In addition, measuring human vital signals (e.g., respiration rate and body temperature) provides rich information that can be used to assess a subject’s physiological or psychological condition. This study aims to design a multifunctional, wearable, fabric-based sensing system. First, carbon nanotube (CNT)-based thin films were fabricated by spraying. Second, the thin films were integrated with stretchable fabrics to form the fabric sensors. Third, the strain and temperature sensing properties of sensors fabricated using different CNT concentrations were characterized. Furthermore, the sensors were demonstrated to detect human finger bending motions, so as to validate their practical strain sensing performance. Finally, to monitor human respiration, the fabric sensors were integrated with a chest band, which was directly worn by a human subject. Quantification of respiration rates were successfully achieved. Overall, the fabric sensors were characterized by advantages such as flexibility, ease of fabrication, lightweight, low-cost, noninvasiveness, and user comfort.

Smart fabric sensors and e-textile technologies: a review

NASA Astrophysics Data System (ADS)

Castano, Lina M.; Flatau, Alison B.

2014-05-01

This paper provides a review of recent developments in the rapidly changing and advancing field of smart fabric sensor and electronic textile technologies. It summarizes the basic principles and approaches employed when building fabric sensors as well as the most commonly used materials and techniques used in electronic textiles. This paper shows that sensing functionality can be created by intrinsic and extrinsic modifications to textile substrates depending on the level of integration into the fabric platform. The current work demonstrates that fabric sensors can be tailored to measure force, pressure, chemicals, humidity and temperature variations. Materials, connectors, fabric circuits, interconnects, encapsulation and fabrication methods associated with fabric technologies prove to be customizable and versatile but less robust than their conventional electronics counterparts. The findings of this survey suggest that a complete smart fabric system is possible through the integration of the different types of textile based functional elements. This work intends to be a starting point for standardization of smart fabric sensing techniques and e-textile fabrication methods.

Fabrication of smart chemical sensors based on transition-doped-semiconductor nanostructure materials with µ-chips.

PubMed

Rahman, Mohammed M; Khan, Sher Bahadar; Asiri, Abdullah M

2014-01-01

Transition metal doped semiconductor nanostructure materials (Sb2O3 doped ZnO microflowers, MFs) are deposited onto tiny µ-chip (surface area, ∼0.02217 cm(2)) to fabricate a smart chemical sensor for toxic ethanol in phosphate buffer solution (0.1 M PBS). The fabricated chemi-sensor is also exhibited higher sensitivity, large-dynamic concentration ranges, long-term stability, and improved electrochemical performances towards ethanol. The calibration plot is linear (r(2) = 0.9989) over the large ethanol concentration ranges (0.17 mM to 0.85 M). The sensitivity and detection limit is ∼5.845 µAcm(-2)mM(-1) and ∼0.11±0.02 mM (signal-to-noise ratio, at a SNR of 3) respectively. Here, doped MFs are prepared by a wet-chemical process using reducing agents in alkaline medium, which characterized by UV/vis., FT-IR, Raman, X-ray photoelectron spectroscopy (XPS), powder X-ray diffraction (XRD), and field-emission scanning electron microscopy (FE-SEM) etc. The fabricated ethanol chemical sensor using Sb2O3-ZnO MFs is simple, reliable, low-sample volume (<70.0 µL), easy of integration, high sensitivity, and excellent stability for the fabrication of efficient I-V sensors on μ-chips.

Fabrication of Smart Chemical Sensors Based on Transition-Doped-Semiconductor Nanostructure Materials with µ-Chips

PubMed Central

Rahman, Mohammed M.; Khan, Sher Bahadar; Asiri, Abdullah M.

2014-01-01

Transition metal doped semiconductor nanostructure materials (Sb2O3 doped ZnO microflowers, MFs) are deposited onto tiny µ-chip (surface area, ∼0.02217 cm2) to fabricate a smart chemical sensor for toxic ethanol in phosphate buffer solution (0.1 M PBS). The fabricated chemi-sensor is also exhibited higher sensitivity, large-dynamic concentration ranges, long-term stability, and improved electrochemical performances towards ethanol. The calibration plot is linear (r2 = 0.9989) over the large ethanol concentration ranges (0.17 mM to 0.85 M). The sensitivity and detection limit is ∼5.845 µAcm−2mM−1 and ∼0.11±0.02 mM (signal-to-noise ratio, at a SNR of 3) respectively. Here, doped MFs are prepared by a wet-chemical process using reducing agents in alkaline medium, which characterized by UV/vis., FT-IR, Raman, X-ray photoelectron spectroscopy (XPS), powder X-ray diffraction (XRD), and field-emission scanning electron microscopy (FE-SEM) etc. The fabricated ethanol chemical sensor using Sb2O3-ZnO MFs is simple, reliable, low-sample volume (<70.0 µL), easy of integration, high sensitivity, and excellent stability for the fabrication of efficient I–V sensors on μ-chips. PMID:24454785

Design, fabrication and metrological evaluation of wearable pressure sensors.

PubMed

Goy, C B; Menichetti, V; Yanicelli, L M; Lucero, J B; López, M A Gómez; Parodi, N F; Herrera, M C

2015-04-01

Pressure sensors are valuable transducers that are necessary in a huge number of medical application. However, the state of the art of compact and lightweight pressure sensors with the capability of measuring the contact pressure between two surfaces (contact pressure sensors) is very poor. In this work, several types of wearable contact pressure sensors are fabricated using different conductive textile materials and piezo-resistive films. The fabricated sensors differ in size, the textile conductor used and/or the number of layers of the sandwiched piezo-resistive film. The intention is to study, through the obtaining of their calibration curves, their metrological properties (repeatability, sensitivity and range) and determine which physical characteristics improve their ability for measuring contact pressures. It has been found that it is possible to obtain wearable contact pressure sensors through the proposed fabrication process with satisfactory repeatability, range and sensitivity; and that some of these properties can be improved by the physical characteristics of the sensors.

Fabrication of strain gauge based sensors for tactile skins

NASA Astrophysics Data System (ADS)

Baptist, Joshua R.; Zhang, Ruoshi; Wei, Danming; Saadatzi, Mohammad Nasser; Popa, Dan O.

2017-05-01

Fabricating cost effective, reliable and functional sensors for electronic skins has been a challenging undertaking for the last several decades. Application of such skins include haptic interfaces, robotic manipulation, and physical human-robot interaction. Much of our recent work has focused on producing compliant sensors that can be easily formed around objects to sense normal, tension, or shear forces. Our past designs have involved the use of flexible sensors and interconnects fabricated on Kapton substrates, and piezoresistive inks that are 3D printed using Electro Hydro Dynamic (EHD) jetting onto interdigitated electrode (IDE) structures. However, EHD print heads require a specialized nozzle and the application of a high-voltage electric field; for which, tuning process parameters can be difficult based on the choice of inks and substrates. Therefore, in this paper we explore sensor fabrication techniques using a novel wet lift-off photolithographic technique for patterning the base polymer piezoresistive material, specifically Poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) or PEDOT:PSS. Fabricated sensors are electrically and thermally characterized, and temperaturecompensated designs are proposed and validated. Packaging techniques for sensors in polymer encapsulants are proposed and demonstrated to produce a tactile interface device for a robot.

Mixed-Potential NO x and NH 3 Sensors Fabricated by Commercial Manufacturing Methods [Mixed-Potential Sensors NO x and NH 3 Fabricated by Commercial Manufacturing Methods

DOE PAGES

Kreller, Cortney R.; Spernjak, Dusan; Li, Wenxia; ...

2014-08-12

Meeting EPA Tier 3 emissions reduction requirements while simultaneously increasing fuel economy to meet new CAFE standards will require optimization of advanced combustion strategies and emissions control technologies. There is an immediate need for suitable exhaust gas sensor technologies to monitor internal combustion engine tailpipe emissions and to control and maintain efficient operation of the engine and exhaust after treatment systems. NH 3, NO x, and HC sensors could enable onboard diagnostics and combustion control in lean-burn engines, analogous to the role of O 2 sensors in stoichiometric burn engines. Commercial manufacturing methods have been used to fabricate self-heated mixed-potentialmore » sensors in a planar automotive configuration. By altering materials composition and operating conditions, we are able to obtain sensitivity/selectivity to each NH 3, NO x and HCs. In addition, these devices exhibit stable performance over months of testing as a result of the stable morphology of the electrode/electrolyte/gas three-phase interface.« less

Laser-assisted fabrication of single-layer flexible touch sensor

PubMed Central

Son, Seokwoo; Park, Jong Eun; Lee, Joohyung; Yang, Minyang; Kang, Bongchul

2016-01-01

Single-layer flexible touch sensor that is designed for the indium-tin-oxide (ITO)-free, bendable, durable, multi-sensible, and single layer transparent touch sensor was developed via a low-cost and one-step laser-induced fabrication technology. To this end, an entirely novel approach involving material, device structure, and even fabrication method was adopted. Conventional metal oxides based multilayer touch structure was substituted by the single layer structure composed of integrated silver wire networks of sensors and bezel interconnections. This structure is concurrently fabricated on a glass substitutive plastic film via the laser-induced fabrication method using the low-cost organometallic/nanoparticle hybrid complex. In addition, this study addresses practical solutions to heterochromia and interference problem with a color display unit. As a result, a practical touch sensor is successfully demonstrated through resolving the heterochromia and interference problems with color display unit. This study could provide the breakthrough for early realization of wearable device. PMID:27703204

Flexible Strain Sensors Fabricated by Meniscus-Guided Printing of Carbon Nanotube-Polymer Composites.

PubMed

Wajahat, Muhammad; Lee, Sanghyeon; Kim, Jung Hyun; Chang, Won Suk; Pyo, Jaeyeon; Cho, Sung Ho; Seol, Seung Kwon

2018-06-13

Printed strain sensors have promising potential as a human-machine interface (HMI) for health-monitoring systems, human-friendly wearable interactive systems, and smart robotics. Herein, flexible strain sensors based on carbon nanotube (CNT)-polymer composites were fabricated by meniscus-guided printing using a CNT ink formulated from multiwall nanotubes (MWNTs) and polyvinylpyrrolidone (PVP); the ink was suitable for micropatterning on nonflat (or curved) substrates and even three-dimensional structures. The printed strain sensors exhibit a reproducible response to applied tensile and compressive strains, having gauge factors of 13.07 under tensile strain and 12.87 under compressive strain; they also exhibit high stability during ∼1500 bending cycles. Applied strains induce a contact rearrangement of the MWNTs and a change in the tunneling distance between them, resulting in a change in the resistance (Δ R/ R 0 ) of the sensor. Printed MWNT-PVP sensors were used in gloves for finger movement detection; these can be applied to human motion detection and remote control of robotic equipment. Our results demonstrate that meniscus-guided printing using CNT inks can produce highly flexible, sensitive, and inexpensive HMI devices.

A flexible piezoelectric force sensor based on PVDF fabrics

NASA Astrophysics Data System (ADS)

Wang, Y. R.; Zheng, J. M.; Ren, G. Y.; Zhang, P. H.; Xu, C.

2011-04-01

Polyvinylidene fluoride (PVDF) film has been widely investigated as a sensor and transducer material due to its high piezo-, pyro- and ferroelectric properties. To activate these properties, PVDF films require a mechanical treatment, stretching or poling. In this paper, we report on a force sensor based on PVDF fabrics with excellent flexibility and breathability, to be used as a specific human-related sensor. PVDF nanofibrous fabrics were prepared by using an electrospinning unit and characterized by means of scanning electron microscopy (SEM), FTIR spectroscopy and x-ray diffraction. Preliminary force sensors have been fabricated and demonstrated excellent sensitivity and response to external mechanical forces. This implies that promising applications can be made for sensing garment pressure, blood pressure, heartbeat rate, respiration rate and accidental impact on the human body.

Sensor for Monitoring Nanodevice-Fabrication Plasmas

NASA Technical Reports Server (NTRS)

Bolshakov, Alexander

2004-01-01

The term plasma process diagnostics (PPD) refers to a spectroscopic technique and sensing hardware that have been proposed for monitoring plasma processes used to fabricate electronic devices that feature sizes as small as several nanometers. Nanometer dimensions are characteristic of the quantum level of miniaturization, where single impurity atoms or molecules can drastically change the local properties of the nanostructures. Such changes may be purposely used in nanoscale design but may also be extremely damaging or cause improper operation of the fabricated devices. Determination of temperature and densities of reactants near the developing features is important, since the structural synthesis is affected by characteristics of the local microenvironment. Consequently, sensors capable of nonintrusive monitoring with high sensitivity and high resolution are essential for real-time atomistic control of reaction kinetics and minimizing trace contamination in plasma processes used to fabricate electronic nanodevices. Such process-monitoring sensors are required to be compact, multiparametric, and immune to the harsh environments of processing plasmas. PPD is intended to satisfy these requirements. The specific technique used to implement plasma diagnostics with a PPD sensor would be an advanced version of continuous-wave cavity-ringdown spectroscopy (CW-CRDS) capable of profiling spectral line broadenings in order to derive both Doppler and Stark components. CRDS is based on measurements of the rate of absorption of laser light in an optical resonator. The ultimate sensitivity results from a very long absorption path length within the cavity and immunity to variations in incident laser intensity. The proposed version of this technique would involve the use of multiplexing tunable laser diodes and an actively modulated high-reflectivity optical resonator, thus offering a synergistic combination of simplicity, compactness, high sensitivity, and high resolution. The

Fabrication of amorphous InGaZnO thin-film transistor-driven flexible thermal and pressure sensors

NASA Astrophysics Data System (ADS)

Park, Ick-Joon; Jeong, Chan-Yong; Cho, In-Tak; Lee, Jong-Ho; Cho, Eou-Sik; Kwon, Sang Jik; Kim, Bosul; Cheong, Woo-Seok; Song, Sang-Hun; Kwon, Hyuck-In

2012-10-01

In this work, we present the results concerning the use of amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistor (TFT) as a driving transistor of the flexible thermal and pressure sensors which are applicable to artificial skin systems. Although the a-IGZO TFT has been attracting much attention as a driving transistor of the next-generation flat panel displays, no study has been performed about the application of this new device to the driving transistor of the flexible sensors yet. The proposed thermal sensor pixel is composed of the series-connected a-IGZO TFT and ZnO-based thermistor fabricated on a polished metal foil, and the ZnO-based thermistor is replaced by the pressure sensitive rubber in the pressure sensor pixel. In both sensor pixels, the a-IGZO TFT acts as the driving transistor and the temperature/pressure-dependent resistance of the ZnO-based thermistor/pressure-sensitive rubber mainly determines the magnitude of the output currents. The fabricated a-IGZO TFT-driven flexible thermal sensor shows around a seven times increase in the output current as the temperature increases from 20 °C to 100 °C, and the a-IGZO TFT-driven flexible pressure sensors also exhibit high sensitivity under various pressure environments.

Fabrication of bimetallic microfluidic surface-enhanced Raman scattering sensors on paper by screen printing.

PubMed

Qu, Lu-Lu; Song, Qi-Xia; Li, Yuan-Ting; Peng, Mao-Pan; Li, Da-Wei; Chen, Li-Xia; Fossey, John S; Long, Yi-Tao

2013-08-20

Au-Ag bimetallic microfluidic, dumbbell-shaped, surface enhanced Raman scattering (SERS) sensors were fabricated on cellulose paper by screen printing. These printed sensors rely on a sample droplet injection zone, and a SERS detection zone at either end of the dumbbell motif, fabricated by printing silver nanoparticles (Ag NPs) and gold nanoparticles (Au NPs) successively with microscale precision. The microfluidic channel was patterned using an insulating ink to connect these two zones and form a hydrophobic circuit. Owing to capillary action of paper in the millimeter-sized channels, the sensor could enable self-filtering of fluids to remove suspended particles within wastewater without pumping. This sensor also allows sensitive SERS detection, due to advantageous combination of the strong surface enhancement of Ag NPs and excellent chemical stability of Au NPs. The SERS performance of the sensors was investigated by employing the probe rhodamine 6G, a limit of detection (LOD) of 1.1×10(-13)M and an enhancement factor of 8.6×10(6) could be achieved. Moreover, the dumbbell-shaped bimetallic sensors exhibited good stability with SERS performance being maintained over 14 weeks in air, and high reproducibility with less than 15% variation in spot-to-spot SERS intensity. Using these dumbbell-shaped bimetallic sensors, substituted aromatic pollutants in wastewater samples could be quantitatively analyzed, which demonstrated their excellent capability for rapid trace pollutant detection in wastewater samples in the field without pre-separation. Copyright © 2013 Elsevier B.V. All rights reserved.

Design and fabrication of vertically-integrated CMOS image sensors.

PubMed

Skorka, Orit; Joseph, Dileepan

2011-01-01

Technologies to fabricate integrated circuits (IC) with 3D structures are an emerging trend in IC design. They are based on vertical stacking of active components to form heterogeneous microsystems. Electronic image sensors will benefit from these technologies because they allow increased pixel-level data processing and device optimization. This paper covers general principles in the design of vertically-integrated (VI) CMOS image sensors that are fabricated by flip-chip bonding. These sensors are composed of a CMOS die and a photodetector die. As a specific example, the paper presents a VI-CMOS image sensor that was designed at the University of Alberta, and fabricated with the help of CMC Microsystems and Micralyne Inc. To realize prototypes, CMOS dies with logarithmic active pixels were prepared in a commercial process, and photodetector dies with metal-semiconductor-metal devices were prepared in a custom process using hydrogenated amorphous silicon. The paper also describes a digital camera that was developed to test the prototype. In this camera, scenes captured by the image sensor are read using an FPGA board, and sent in real time to a PC over USB for data processing and display. Experimental results show that the VI-CMOS prototype has a higher dynamic range and a lower dark limit than conventional electronic image sensors.

Screen printing of a capacitive cantilever-based motion sensor on fabric using a novel sacrificial layer process for smart fabric applications

NASA Astrophysics Data System (ADS)

Wei, Yang; Torah, Russel; Yang, Kai; Beeby, Steve; Tudor, John

2013-07-01

Free-standing cantilevers have been fabricated by screen printing sacrificial and structural layers onto a standard polyester cotton fabric. By printing additional conductive layers, a complete capacitive motion sensor on fabric using only screen printing has been fabricated. This type of free-standing structure cannot currently be fabricated using conventional fabric manufacturing processes. In addition, compared to conventional smart fabric fabrication processes (e.g. weaving and knitting), screen printing offers the advantages of geometric design flexibility and the ability to simultaneously print multiple devices of the same or different designs. Furthermore, a range of active inks exists from the printed electronics industry which can potentially be applied to create many types of smart fabric. Four cantilevers with different lengths have been printed on fabric using a five-layer structure with a sacrificial material underneath the cantilever. The sacrificial layer is subsequently removed at 160 °C for 30 min to achieve a freestanding cantilever above the fabric. Two silver electrodes, one on top of the cantilever and the other on top of the fabric, are used to capacitively detect the movement of the cantilever. In this way, an entirely printed motion sensor is produced on a standard fabric. The motion sensor was initially tested on an electromechanical shaker rig at a low frequency range to examine the linearity and the sensitivity of each design. Then, these sensors were individually attached to a moving human forearm to evaluate more representative results. A commercial accelerometer (Microstrain G-link) was mounted alongside for comparison. The printed sensors have a similar motion response to the commercial accelerometer, demonstrating the potential of a printed smart fabric motion sensor for use in intelligent clothing applications.

An integrated optical oxygen sensor fabricated using rapid-prototyping techniques.

PubMed

Chang-Yen, David A; Gale, Bruce K

2003-11-01

This paper details the design and fabrication of an integrated optical biochemical sensor using a select oxygen-sensitive fluorescent dye, tris(2,2'-bipyridyl) dichlororuthenium(ii) hexahydrate, combined with polymeric waveguides that are fabricated on a glass substrate. The sensor uses evanescent interaction of light confined within the waveguide with the dye that is immobilized on an SU-8 waveguide surface. Adhesion of the dye to the integrated waveguide surface is accomplished using a unique process of spin-coating/electrostatic layer-by-layer formation. The SU-8 waveguide was chemically modified to allow the deposition process. Exposure of the dye molecules to the analyte and subsequent chemical interaction is achieved by directly coupling the fluid channel to the integrated waveguide. The completed sensor was linear in the dissolved oxygen across a wide range of interest and had a sensitivity of 0.6 ppm. A unique fabrication aspect of this sensor is the inherent simplicity of the design, and the resulting rapidity of fabrication, while maintaining a high degree of functionality and flexibility.

New Flexible Silicone-Based EEG Dry Sensor Material Compositions Exhibiting Improvements in Lifespan, Conductivity, and Reliability.

PubMed

Yu, Yi-Hsin; Chen, Shih-Hsun; Chang, Che-Lun; Lin, Chin-Teng; Hairston, W David; Mrozek, Randy A

2016-10-31

This study investigates alternative material compositions for flexible silicone-based dry electroencephalography (EEG) electrodes to improve the performance lifespan while maintaining high-fidelity transmission of EEG signals. Electrode materials were fabricated with varying concentrations of silver-coated silica and silver flakes to evaluate their electrical, mechanical, and EEG transmission performance. Scanning electron microscope (SEM) analysis of the initial electrode development identified some weak points in the sensors' construction, including particle pull-out and ablation of the silver coating on the silica filler. The newly-developed sensor materials achieved significant improvement in EEG measurements while maintaining the advantages of previous silicone-based electrodes, including flexibility and non-toxicity. The experimental results indicated that the proposed electrodes maintained suitable performance even after exposure to temperature fluctuations, 85% relative humidity, and enhanced corrosion conditions demonstrating improvements in the environmental stability. Fabricated flat (forehead) and acicular (hairy sites) electrodes composed of the optimum identified formulation exhibited low impedance and reliable EEG measurement; some initial human experiments demonstrate the feasibility of using these silicone-based electrodes for typical lab data collection applications.

Development of Fabric-Based Chemical Gas Sensors for Use as Wearable Electronic Noses

PubMed Central

Seesaard, Thara; Lorwongtragool, Panida; Kerdcharoen, Teerakiat

2015-01-01

Novel gas sensors embroidered into fabric substrates based on polymers/ SWNT-COOH nanocomposites were proposed in this paper, aiming for their use as a wearable electronic nose (e-nose). The fabric-based chemical gas sensors were fabricated by two main processes: drop coating and embroidery. Four potential polymers (PVC, cumene-PSMA, PSE and PVP)/functionalized-SWCNT sensing materials were deposited onto interdigitated electrodes previously prepared by embroidering conductive thread on a fabric substrate to make an optimal set of sensors. After preliminary trials of the obtained sensors, it was found that the sensors yielded a electrical resistance in the region of a few kilo-Ohms. The sensors were tested with various volatile compounds such as ammonium hydroxide, ethanol, pyridine, triethylamine, methanol and acetone, which are commonly found in the wastes released from the human body. These sensors were used to detect and discriminate between the body odors of different regions and exist in various forms such as the urine, armpit and exhaled breath odor. Based on a simple pattern recognition technique, we have shown that the proposed fabric-based chemical gas sensors can discriminate the human body odor from two persons. PMID:25602265

Development of fabric-based chemical gas sensors for use as wearable electronic noses.

PubMed

Seesaard, Thara; Lorwongtragool, Panida; Kerdcharoen, Teerakiat

2015-01-16

Novel gas sensors embroidered into fabric substrates based on polymers/ SWNT-COOH nanocomposites were proposed in this paper, aiming for their use as a wearable electronic nose (e-nose). The fabric-based chemical gas sensors were fabricated by two main processes: drop coating and embroidery. Four potential polymers (PVC, cumene-PSMA, PSE and PVP)/functionalized-SWCNT sensing materials were deposited onto interdigitated electrodes previously prepared by embroidering conductive thread on a fabric substrate to make an optimal set of sensors. After preliminary trials of the obtained sensors, it was found that the sensors yielded a electrical resistance in the region of a few kilo-Ohms. The sensors were tested with various volatile compounds such as ammonium hydroxide, ethanol, pyridine, triethylamine, methanol and acetone, which are commonly found in the wastes released from the human body. These sensors were used to detect and discriminate between the body odors of different regions and exist in various forms such as the urine, armpit and exhaled breath odor. Based on a simple pattern recognition technique, we have shown that the proposed fabric-based chemical gas sensors can discriminate the human body odor from two persons.

Fabric strain sensor integrated with CNPECs for repeated large deformation

NASA Astrophysics Data System (ADS)

Yi, Weijing

Flexible and soft strain sensors that can be used in smart textiles for wearable applications are much desired. They should meet the requirements of low modulus, large working range and good fatigue resistance as well as good sensing performances. However, there were no commercial products available and the objective of the thesis is to investigate fabric strain sensors based on carbon nanoparticle (CNP) filled elastomer composites (CNPECs) for potential wearing applications. Conductive CNPECs were fabricated and investigated. The introduction of silicone oil (SO) significantly decreased modulus of the composites to less than 1 MPa without affecting their deformability and they showed good stability after heat treatment. With increase of CNP concentration, a percolation appeared in electrical resistivity and the composites can be divided into three ranges. I-V curves and impedance spectra together with electro-mechanical studies demonstrated a balance between sensitivity and working range for the composites with CNP concentrations in post percolation range, and were preferred for sensing applications only if the fatigue life was improved. Due to the good elasticity and failure resist property of knitted fabric under repeated extension, it was adopted as substrate to increase the fatigue life of the conductive composites. After optimization of processing parameters, the conductive fabric with CNP concentration of 9.0CNP showed linear I-V curves when voltage is in the range of -1 V/mm and 1 V/mm and negligible capacitive behavior when frequency below 103 Hz even with strain of 60%. It showed higher sensitivity due to the combination of nonlinear resistance-strain behavior of the CNPECs and non-even strain distribution of knitted fabric under extension. The fatigue life of the conductive fabric was greatly improved. Extended on the studies of CNPECs and the coated conductive fabrics, a fabric strain sensor was designed, fabricated and packaged. The Young's modulus of

Design and Fabrication of Vertically-Integrated CMOS Image Sensors

PubMed Central

Skorka, Orit; Joseph, Dileepan

2011-01-01

Technologies to fabricate integrated circuits (IC) with 3D structures are an emerging trend in IC design. They are based on vertical stacking of active components to form heterogeneous microsystems. Electronic image sensors will benefit from these technologies because they allow increased pixel-level data processing and device optimization. This paper covers general principles in the design of vertically-integrated (VI) CMOS image sensors that are fabricated by flip-chip bonding. These sensors are composed of a CMOS die and a photodetector die. As a specific example, the paper presents a VI-CMOS image sensor that was designed at the University of Alberta, and fabricated with the help of CMC Microsystems and Micralyne Inc. To realize prototypes, CMOS dies with logarithmic active pixels were prepared in a commercial process, and photodetector dies with metal-semiconductor-metal devices were prepared in a custom process using hydrogenated amorphous silicon. The paper also describes a digital camera that was developed to test the prototype. In this camera, scenes captured by the image sensor are read using an FPGA board, and sent in real time to a PC over USB for data processing and display. Experimental results show that the VI-CMOS prototype has a higher dynamic range and a lower dark limit than conventional electronic image sensors. PMID:22163860

Fabrication of a Flexible Micro Temperature Sensor for Micro Reformer Applications

PubMed Central

Lee, Chi-Yuan; Lin, Chien-Hen; Lo, Yi-Man

2011-01-01

Micro reformers still face obstacles in minimizing their size, decreasing the concentration of CO, conversion efficiency and the feasibility of integrated fabrication with fuel cells. By using a micro temperature sensor fabricated on a stainless steel-based micro reformer, this work attempts to measure the inner temperature and increase the conversion efficiency. Micro temperature sensors on a stainless steel substrate are fabricated using micro-electro-mechanical systems (MEMS) and then placed separately inside the micro reformer. Micro temperature sensors are characterized by their higher accuracy and sensitivity than those of a conventional thermocouple. To the best of our knowledge, micro temperature sensors have not been embedded before in micro reformers and commercial products, therefore, this work presents a novel approach to integrating micro temperature sensors in a stainless steel-based micro reformer in order to evaluate inner local temperature distributions and enhance reformer performance. PMID:22163817

Fabrication of a printed capacitive air-gap touch sensor

NASA Astrophysics Data System (ADS)

Lee, Sang Hoon; Seo, Hwiwon; Lee, Sangyoon

2018-05-01

Unlike lithography-based processes, printed electronics does not require etching, which makes it difficult to fabricate electronic devices with an air gap. In this study, we propose a method to fabricate capacitive air-gap touch sensors via printing and coating. First, the bottom electrode was fabricated on a flexible poly(ethylene terephthalate) (PET) substrate using roll-to-roll gravure printing with silver ink. Then poly(dimethylsiloxane) (PDMS) was spin coated to form a sacrificial layer. The top electrode was fabricated on the sacrificial layer by spin coating with a stretchable silver ink. The sensor samples were then put in a tetrabutylammonium (TBAF) bath to generate the air gap by removing the sacrificial layer. The capacitance of the samples was measured for verification, and the results show that the capacitance increases in proportion to the applied force from 0 to 2.5 N.

Scalable fabrication of nanomaterials based piezoresistivity sensors with enhanced performance

NASA Astrophysics Data System (ADS)

Hoang, Phong Tran

Nanomaterials are small structures that have at least one dimension less than 100 nanometers. Depending on the number of dimensions that are not confined to the nanoscale range, nanomaterials can be classified into 0D, 1D and 2D types. Due to their small sizes, nanoparticles possess exceptional physical and chemical properties which opens a unique possibility for the next generation of strain sensors that are cheap, multifunctional, high sensitivity and reliability. Over the years, thanks to the development of new nanomaterials and the printing technologies, a number of printing techniques have been developed to fabricate a wide range of electronic devices on diverse substrates. Nanomaterials based thin film devices can be readily patterned and fabricated in a variety of ways, including printing, spraying and laser direct writing. In this work, we review the piezoresistivity of nanomaterials of different categories and study various printing approaches to utilize their excellent properties in the fabrication of scalable and printable thin film strain gauges. CNT-AgNP composite thin films were fabricated using a solution based screen printing process. By controlling the concentration ratio of CNTs to AgNPs in the nanocomposites and the supporting substrates, we were able to engineer the crack formation to achieve stable and high sensitivity sensors. The crack formation in the composite films lead to piezoresistive sensors with high GFs up to 221.2. Also, with a simple, low cost, and easy to scale up fabrication process they may find use as an alternative to traditional strain sensors. By using computer controlled spray coating system, we can achieve uniform and high quality CNTs thin films for the fabrication of strain sensors and transparent / flexible electrodes. A simple diazonium salt treatment of the pristine SWCNT thin film has been identified to be efficient in greatly enhancing the piezoresistive sensitivity of SWCNT thin film based piezoresistive sensors

Sensing human physiological response using wearable carbon nanotube-based fabrics

NASA Astrophysics Data System (ADS)

Wang, Long; Loh, Kenneth J.; Koo, Helen S.

2016-04-01

Flexible and wearable sensors for human monitoring have received increased attention. Besides detecting motion and physical activity, measuring human vital signals (e.g., respiration rate and body temperature) provide rich data for assessing subjects' physiological or psychological condition. Instead of using conventional, bulky, sensing transducers, the objective of this study was to design and test a wearable, fabric-like sensing system. In particular, multi-walled carbon nanotube (MWCNT)-latex thin films of different MWCNT concentrations were first fabricated using spray coating. Freestanding MWCNT-latex films were then sandwiched between two layers of flexible fabric using iron-on adhesive to form the wearable sensor. Second, to characterize its strain sensing properties, the fabric sensors were subjected to uniaxial and cyclic tensile load tests, and they exhibited relatively stable electromechanical responses. Finally, the wearable sensors were placed on a human subject for monitoring simple motions and for validating their practical strain sensing performance. Overall, the wearable fabric sensor design exhibited advances such as flexibility, ease of fabrication, light weight, low cost, noninvasiveness, and user comfort.

Fabrication and characterization of bending and pressure sensors for a soft prosthetic hand

NASA Astrophysics Data System (ADS)

Rocha, Rui Pedro; Alhais Lopes, Pedro; de Almeida, Anibal T.; Tavakoli, Mahmoud; Majidi, Carmel

2018-03-01

We demonstrate fabrication, characterization, and implementation of ‘soft-matter’ pressure and bending sensors for a soft robotic hand. The elastomer-based sensors are embedded in a robot finger composed of a 3D printed endoskeleton and covered by an elastomeric skin. Two types of sensors are evaluated, resistive pressure sensors and capacitive pressure sensors. The sensor is fabricated entirely out of insulating and conductive rubber, the latter composed of polydimethylsiloxane (PDMS) elastomer embedded with a percolating network of structured carbon black (CB). The sensor-integrated fingers have a simple materials architecture, can be fabricated with standard rapid prototyping methods, and are inexpensive to produce. When incorporated into a robotic hand, the CB-PDMS sensors and PDMS carrier medium function as an ‘artificial skin’ for touch and bend detection. Results show improved response with a capacitive sensor architecture, which, unlike a resistive sensor, is robust to electromechanical hysteresis, creep, and drift in the CB-PDMS composite. The sensorized fingers are integrated in an anthropomorphic hand and results for a variety of grasping tasks are presented.

Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass

PubMed Central

He, Fei; Liao, Yang; Lin, Jintian; Song, Jiangxin; Qiao, Lingling; Cheng, Ya; Sugioka, Koji

2014-01-01

Femtosecond lasers have revolutionized the processing of materials, since their ultrashort pulse width and extremely high peak intensity allows high-quality micro- and nanofabrication of three-dimensional (3D) structures. This unique capability opens up a new route for fabrication of microfluidic sensors for biochemical applications. The present paper presents a comprehensive review of recent advancements in femtosecond laser processing of glass for a variety of microfluidic sensor applications. These include 3D integration of micro-/nanofluidic, optofluidic, electrofluidic, surface-enhanced Raman-scattering devices, in addition to fabrication of devices for microfluidic bioassays and lab-on-fiber sensors. This paper describes the unique characteristics of femtosecond laser processing and the basic concepts involved in femtosecond laser direct writing. Advanced spatiotemporal beam shaping methods are also discussed. Typical examples of microfluidic sensors fabricated using femtosecond lasers are then highlighted, and their applications in chemical and biological sensing are described. Finally, a summary of the technology is given and the outlook for further developments in this field is considered. PMID:25330047

Whole Wafer Design and Fabrication for the Alignment of Nanostructures for Chemical Sensor Applications

NASA Technical Reports Server (NTRS)

Biaggi-Labiosa, Azlin M.; Hunter, Gary W.

2013-01-01

A major objective in aerospace sensor development is to produce sensors that are small in size, easy to batch fabricate and low in cost, and have low power consumption The fabrication of chemical sensors involving nanostructured materials can provide these properties as well as the potential for the development of sensor systems with unique properties and improved performance. However, the fabrication and processing of nanostructures for sensor applications currently is limited in the ability to control their location on the sensor. Currently, our group at NASA Glenn Research Center has demonstrated the controlled placement of nanostructures in sensors using a sawtooth patterned electrode design. With this design the nanostructures are aligned between opposing sawtooth electrodes by applying an alternating current.

Photo-crosslinkable polymers for fabrication of photonic multilayer sensors

NASA Astrophysics Data System (ADS)

Chiappelli, Maria; Hayward, Ryan C.

2013-03-01

We have used photo-crosslinkable polymers to fabricate photonic multilayer sensors. Benzophenone is utilized as a covalently incorporated pendent photo-crosslinker, providing a convenient means of fabricating multilayer films by sequential spin-coating and crosslinking processes. Colorimetric temperature sensors were designed from thermally-responsive, low-refractive index poly(N-isopropylacrylamide) (PNIPAM) and high-refractive index poly(para-methyl styrene) (P pMS). Copolymer chemistries and layer thicknesses were selected to provide robust multilayer sensors which show color changes across nearly the full visible spectrum due to changes in temperature of the hydrated film stack. We have characterized the uniformity and interfacial broadening within the multilayers, the kinetics of swelling and de-swelling, and the reversibility over multiple hydration/dehydration cycles. We also describe how the approach can be extended to alternative sensor designs through the ability to tailor each layer independently, as well as to additional stimuli by selecting alternative copolymer chemistries.

Wearable sensor glove based on conducting fabric using electrodermal activity and pulse-wave sensors for e-health application.

PubMed

Lee, Youngbum; Lee, Byungwoo; Lee, Myoungho

2010-03-01

Improvement of the quality and efficiency of health in medicine, both at home and the hospital, calls for improved sensors that might be included in a common carrier such as a wearable sensor device to measure various biosignals and provide healthcare services that use e-health technology. Designed to be user-friendly, smart clothes and gloves respond well to the end users for health monitoring. This study describes a wearable sensor glove that is equipped with an electrodermal activity (EDA) sensor, pulse-wave sensor, conducting fabric, and an embedded system. The EDA sensor utilizes the relationship between drowsiness and the EDA signal. The EDA sensors were made using a conducting fabric instead of silver chloride electrodes, as a more practical and practically wearable device. The pulse-wave sensor measurement system, which is widely applied in oriental medicinal practices, is also a strong element in e-health monitoring systems. The EDA and pulse-wave signal acquisition module was constructed by connecting the sensor to the glove via a conductive fabric. The signal acquisition module is then connected to a personal computer that displays the results of the EDA and pulse-wave signal processing analysis and gives accurate feedback to the user. This system is designed for a number of applications for the e-health services, including drowsiness detection and oriental medicine.

Compact silicon diffractive sensor: design, fabrication, and prototype.

PubMed

Maikisch, Jonathan S; Gaylord, Thomas K

2012-07-01

An in-plane constant-efficiency variable-diffraction-angle grating and an in-plane high-angular-selectivity grating are combined to enable a new compact silicon diffractive sensor. This sensor is fabricated in silicon-on-insulator and uses telecommunications wavelengths. A single sensor element has a micron-scale device size and uses intensity-based (as opposed to spectral-based) detection for increased integrability. In-plane diffraction gratings provide an intrinsic splitting mechanism to enable a two-dimensional sensor array. Detection of the relative values of diffracted and transmitted intensities is independent of attenuation and is thus robust. The sensor prototype measures refractive index changes of 10(-4). Simulations indicate that this sensor configuration may be capable of measuring refractive index changes three or four orders of magnitude smaller. The characteristics of this sensor type make it promising for lab-on-a-chip applications.

Fabrication of thermal microphotonic sensors and sensor arrays

DOEpatents

Shaw, Michael J.; Watts, Michael R.; Nielson, Gregory N.

2010-10-26

A thermal microphotonic sensor is fabricated on a silicon substrate by etching an opening and a trench into the substrate, and then filling in the opening and trench with silicon oxide which can be deposited or formed by thermally oxidizing a portion of the silicon substrate surrounding the opening and trench. The silicon oxide forms a support post for an optical resonator which is subsequently formed from a layer of silicon nitride, and also forms a base for an optical waveguide formed from the silicon nitride layer. Part of the silicon substrate can be selectively etched away to elevate the waveguide and resonator. The thermal microphotonic sensor, which is useful to detect infrared radiation via a change in the evanescent coupling of light between the waveguide and resonator, can be formed as a single device or as an array.

A Dynamic Infrastructure for Interconnecting Disparate ISR/ISTAR Assets (the ITA Sensor Fabric)

DTIC Science & Technology

2009-07-01

areas of sensor identification, classification, interoperability and sensor data sharing, dissemination and consumability. This paper presents the ITA...sensors in the area of operations. This paper also presents a use case scenario developed in partnership with the U.S. Army Research Laboratory (ARL) and... paper we describe the Fabric, and its application to a simulated representative coalition operation scenario. The Fabric spans the network from the

Flexible MEMS: A novel technology to fabricate flexible sensors and electronics

NASA Astrophysics Data System (ADS)

Tu, Hongen

This dissertation presents the design and fabrication techniques used to fabricate flexible MEMS (Micro Electro Mechanical Systems) devices. MEMS devices and CMOS(Complementary Metal-Oxide-Semiconductor) circuits are traditionally fabricated on rigid substrates with inorganic semiconductor materials such as Silicon. However, it is highly desirable that functional elements like sensors, actuators or micro fluidic components to be fabricated on flexible substrates for a wide variety of applications. Due to the fact that flexible substrate is temperature sensitive, typically only low temperature materials, such as polymers, metals, and organic semiconductor materials, can be directly fabricated on flexible substrates. A novel technology based on XeF2(xenon difluoride) isotropic silicon etching and parylene conformal coating, which is able to monolithically incorporate high temperature materials and fluidic channels, was developed at Wayne State University. The technology was first implemented in the development of out-of-plane parylene microneedle arrays that can be individually addressed by integrated flexible micro-channels. These devices enable the delivery of chemicals with controlled temporal and spatial patterns and allow us to study neurotransmitter-based retinal prosthesis. The technology was further explored by adopting the conventional SOI-CMOS processes. High performance and high density CMOS circuits can be first fabricated on SOI wafers, and then be integrated into flexible substrates. Flexible p-channel MOSFETs (Metal-Oxide-Semiconductor Field-Effect-Transistors) were successfully integrated and tested. Integration of pressure sensors and flow sensors based on single crystal silicon has also been demonstrated. A novel smart yarn technology that enables the invisible integration of sensors and electronics into fabrics has been developed. The most significant advantage of this technology is its post-MEMS and post-CMOS compatibility. Various high

A Rapid Process for Fabricating Gas Sensors

PubMed Central

Hsiao, Chun-Ching; Luo, Li-Siang

2014-01-01

Zinc oxide (ZnO) is a low-toxicity and environmentally-friendly material applied on devices, sensors or actuators for “green” usage. A porous ZnO film deposited by a rapid process of aerosol deposition (AD) was employed as the gas-sensitive material in a CO gas sensor to reduce both manufacturing cost and time, and to further extend the AD application for a large-scale production. The relative resistance change (ΔR/R) of the ZnO gas sensor was used for gas measurement. The fabricated ZnO gas sensors were measured with operating temperatures ranging from 110 °C to 180 °C, and CO concentrations ranging from 100 ppm to 1000 ppm. The sensitivity and the response time presented good performance at increasing operating temperatures and CO concentrations. AD was successfully for applied for making ZnO gas sensors with great potential for achieving high deposition rates at low deposition temperatures, large-scale production and low cost. PMID:25010696

Fabrication and Evaluation of a Graphene Oxide-Based Capacitive Humidity Sensor.

PubMed

Feng, Jinfeng; Kang, Xiaoxu; Zuo, Qingyun; Yuan, Chao; Wang, Weijun; Zhao, Yuhang; Zhu, Limin; Lu, Hanwei; Chen, Juying

2016-03-01

In this study, a CMOS compatible capacitive humidity sensor structure was designed and fabricated on a 200 mm CMOS BEOL Line. A top Al interconnect layer was used as an electrode with a comb/serpent structure, and graphene oxide (GO) was used as sensing material. XRD analysis was done which shows that GO sensing material has a strong and sharp (002) peak at about 10.278°, whereas graphite has (002) peak at about 26°. Device level CV and IV curves were measured in mini-environments at different relative humidity (RH) level, and saturated salt solutions were used to build these mini-environments. To evaluate the potential value of GO material in humidity sensor applications, a prototype humidity sensor was designed and fabricated by integrating the sensor with a dedicated readout ASIC and display/calibration module. Measurements in different mini-environments show that the GO-based humidity sensor has higher sensitivity, faster recovery time and good linearity performance. Compared with a standard humidity sensor, the measured RH data of our prototype humidity sensor can match well that of the standard product.

Fabrication of Highly Sensitive Nonenzymatic Electrochemical H₂O₂ Sensor Based on Pt Nanoparticles Anchored Reduced Graphene Oxide.

PubMed

Dhara, Keerthy; Ramachandran, T; Nair, Bipin G; Babu, T G Satheesh

2018-06-01

A highly sensitive nonenzymatic hydrogen peroxide (H2O2) sensor was fabricated using platinum nanoparticles decorated reduced graphene oxide (Pt/rGO) nanocomposite. The Pt/rGO nanocomposite was prepared by single-step chemical reduction method. Nanocomposite was characterized by various analytical techniques including Raman spectroscopy, X-ray diffraction, field emission scanning electron microscope and high-resolution transmission electron microscopy. Screen printed electrodes (SPEs) were fabricated and the nanocomposite was cast on the working area of the SPE. Cyclic voltammetry and amperometry demonstrated that the Pt/rGO/SPE displayed much higher electrocatalytic activity towards the reduction of H2O2 than the other modified electrodes. The sensor exhibited wide linear detection range (from 10 μM to 8 mM), very high sensitivity of 1848 μA mM-1 cm-2 and a lower limit of detection of 0.06 μM. The excellent performance of Pt/rGO/SPE sensor were attributed to the reduced graphene oxide being used as an effective matrix to load a number of Pt nanoparticles and the synergistic amplification effect of the two kinds of nanomaterials. Moreover, the sensor showed remarkable features such as good reproducibility, repeatability, long-term stability, and selectivity.

Facile Fabrication of Multi-hierarchical Porous Polyaniline Composite as Pressure Sensor and Gas Sensor with Adjustable Sensitivity

NASA Astrophysics Data System (ADS)

He, Xiao-Xiao; Li, Jin-Tao; Jia, Xian-Sheng; Tong, Lu; Wang, Xiao-Xiong; Zhang, Jun; Zheng, Jie; Ning, Xin; Long, Yun-Ze

2017-08-01

A multi-hierarchical porous polyaniline (PANI) composite which could be used in good performance pressure sensor and adjustable sensitivity gas sensor has been fabricated by a facile in situ polymerization. Commercial grade sponge was utilized as a template scaffold to deposit PANI via in situ polymerization. With abundant interconnected pores throughout the whole structure, the sponge provided sufficient surface for the growth of PANI nanobranches. The flexible porous structure helped the composite to show high performance in pressure detection with fast response and favorable recoverability and gas detection with adjustable sensitivity. The sensing mechanism of the PANI/sponge-based flexible sensor has also been discussed. The results indicate that this work provides a feasible approach to fabricate efficient sensors with advantages of low cost, facile preparation, and easy signal collection.

Facile Fabrication of Multi-hierarchical Porous Polyaniline Composite as Pressure Sensor and Gas Sensor with Adjustable Sensitivity.

PubMed

He, Xiao-Xiao; Li, Jin-Tao; Jia, Xian-Sheng; Tong, Lu; Wang, Xiao-Xiong; Zhang, Jun; Zheng, Jie; Ning, Xin; Long, Yun-Ze

2017-12-01

A multi-hierarchical porous polyaniline (PANI) composite which could be used in good performance pressure sensor and adjustable sensitivity gas sensor has been fabricated by a facile in situ polymerization. Commercial grade sponge was utilized as a template scaffold to deposit PANI via in situ polymerization. With abundant interconnected pores throughout the whole structure, the sponge provided sufficient surface for the growth of PANI nanobranches. The flexible porous structure helped the composite to show high performance in pressure detection with fast response and favorable recoverability and gas detection with adjustable sensitivity. The sensing mechanism of the PANI/sponge-based flexible sensor has also been discussed. The results indicate that this work provides a feasible approach to fabricate efficient sensors with advantages of low cost, facile preparation, and easy signal collection.

Humidity Sensors Principle, Mechanism, and Fabrication Technologies: A Comprehensive Review

PubMed Central

Farahani, Hamid; Wagiran, Rahman; Hamidon, Mohd Nizar

2014-01-01

Humidity measurement is one of the most significant issues in various areas of applications such as instrumentation, automated systems, agriculture, climatology and GIS. Numerous sorts of humidity sensors fabricated and developed for industrial and laboratory applications are reviewed and presented in this article. The survey frequently concentrates on the RH sensors based upon their organic and inorganic functional materials, e.g., porous ceramics (semiconductors), polymers, ceramic/polymer and electrolytes, as well as conduction mechanism and fabrication technologies. A significant aim of this review is to provide a distinct categorization pursuant to state of the art humidity sensor types, principles of work, sensing substances, transduction mechanisms, and production technologies. Furthermore, performance characteristics of the different humidity sensors such as electrical and statistical data will be detailed and gives an added value to the report. By comparison of overall prospects of the sensors it was revealed that there are still drawbacks as to efficiency of sensing elements and conduction values. The flexibility offered by thick film and thin film processes either in the preparation of materials or in the choice of shape and size of the sensor structure provides advantages over other technologies. These ceramic sensors show faster response than other types. PMID:24784036

Design and fabrication of a CMOS-compatible MHP gas sensor

DOE Office of Scientific and Technical Information (OSTI.GOV)

Li, Ying; Yu, Jun, E-mail: junyu@dlut.edu.cn; Wu, Hao

2014-03-15

A novel micro-hotplate (MHP) gas sensor is designed and fabricated with a standard CMOS technology followed by post-CMOS processes. The tungsten plugging between the first and the second metal layer in the CMOS processes is designed as zigzag resistor heaters embedded in the membrane. In the post-CMOS processes, the membrane is released by front-side bulk silicon etching, and excellent adiabatic performance of the sensor is obtained. Pt/Ti electrode films are prepared on the MHP before the coating of the SnO{sub 2} film, which are promising to present better contact stability compared with Al electrodes. Measurements show that at room temperaturemore » in atmosphere, the device has a low power consumption of ∼19 mW and a rapid thermal response of 8 ms for heating up to 300 °C. The tungsten heater exhibits good high temperature stability with a slight fluctuation (<0.3%) in the resistance at an operation temperature of 300 °C under constant heating mode for 336 h, and a satisfactory temperature coefficient of resistance of about 1.9‰/°C.« less

Simple graphene chemiresistors as pH sensors: fabrication and characterization

NASA Astrophysics Data System (ADS)

Lei, Nan; Li, Pengfei; Xue, Wei; Xu, Jie

2011-10-01

We report the fabrication and characterization of a simple gate-free graphene device as a pH sensor. The graphene sheets are made by mechanical exfoliation. Platinum contact electrodes are fabricated with a mask-free process using a focused ion beam and then expanded by silver paint. Annealing is used to improve the electrical contact. The experiment on the fabricated graphene device shows that the resistance of the device decreases linearly with increasing pH values (in the range of 4-10) in the surrounding liquid environment. The resolution achieved in our experiments is approximately 0.3 pH in alkali environment. The sensitivity of the device is calculated as approximately 2 kΩ pH-1. The simple configuration, miniaturized size and integration ability make graphene-based sensors promising candidates for future micro/nano applications.

Bio-inspired piezoelectric artificial hair cell sensor fabricated by powder injection molding

NASA Astrophysics Data System (ADS)

Han, Jun Sae; Oh, Keun Ha; Moon, Won Kyu; Kim, Kyungseop; Joh, Cheeyoung; Seo, Hee Seon; Bollina, Ravi; Park, Seong Jin

2015-12-01

A piezoelectric artificial hair cell sensor was fabricated by the powder injection molding process in order to make an acoustic vector hydrophone. The entire process of powder injection molding was developed and optimized for PMN-PZT ceramic powder. The artificial hair cell sensor, which consists of high aspect ratio hair cell and three rectangular mechanoreceptors, was precisely fabricated through the developed powder injection molding process. The density and the dielectric property of the fabricated sensor shows 98% of the theoretical density and 85% of reference dielectric property of PMN-PZT ceramic powder. With regard to homogeneity, three rectangular mechanoreceptors have the same dimensions, with 3 μm of tolerance with 8% of deviation of dielectric property. Packaged vector hydrophones measure the underwater acoustic signals from 500 to 800 Hz with -212 dB of sensitivity. Directivity of vector hydrophone was acquired at 600 Hz as analyzing phase differences of electric signals.

Polydimethylsiloxane-fabricated optical fiber sensor capable of measuring both large axial and shear strain

NASA Astrophysics Data System (ADS)

Shen, Yu; Wang, Ziyuan; Wen, Huaihai; Zhou, Zhi

2014-11-01

Fiber optic sensor (FOS) has received much attention in the field of Structure Health Monitoring (SHM) due to its advantages of low weight, small size, high sensitivity multiplexing ability, free of electromagnetic interference and long durability. However, in harsh environments, structures often undergo large strain where few traditional fiber optic sensors could survive. This paper report a novel material with features of light-transparent, chemically inert, thermally stable material Polydimethylsiloxane(PDMS) fabricated large axial/shearing strain sensor. The sensor was fabricated by directly coupling a conventional signal mode fiber into half cured PDMS material using a translation stage under the inspection of a microscope. Meanwhile, a laser diode and a photo detector were used in the fabrication process to make sure the sensor achieved minimum light loss. An experiment was conducted later to investigate the sensor's transmission characteristic in 1310nm infrared laser relating with the applied axial/shearing strain. The results show that the proposed sensor survived an axial strain of 6 7.79 x 106 μɛ ; a shear of 4 6.49 x 104 μɛ with good linearity and repetition. The experiment indicates that the proposed sensor can potentially be used as strain sensing elements in Structure Health Monitoring systems under earthquake or explosion.

A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology

PubMed Central

Huang, Che-Wei; Huang, Yu-Jie; Lu, Shey-Shi; Lin, Chih-Ting

2012-01-01

A fully integrated humidity sensor chip was designed, implemented, and tested. Utilizing the micro-stamping technology, the pseudo-3D sensor system-on-chip (SSoC) architecture can be implemented by stacking sensing materials directly on the top of a CMOS-fabricated chip. The fabricated sensor system-on-chip (2.28 mm × 2.48 mm) integrated a humidity sensor, an interface circuit, a digital controller, and an On-Off Keying (OOK) wireless transceiver. With low power consumption, i.e., 750 μW without RF operation, the sensitivity of developed sensor chip was experimentally verified in the relative humidity (RH) range from 32% to 60%. The response time of the chip was also experimentally verified to be within 5 seconds from RH 36% to RH 64%. As a consequence, the implemented humidity SSoC paves the way toward the an ultra-small sensor system for various applications.

Fabrication of a Miniature Multi-Parameter Sensor Chip for Water Quality Assessment.

PubMed

Zhou, Bo; Bian, Chao; Tong, Jianhua; Xia, Shanhong

2017-01-14

Water contamination is a main inducement of human diseases. It is an important step to monitor the water quality in the water distribution system. Due to the features of large size, high cost, and complicated structure of traditional water determination sensors and devices, it is difficult to realize real-time water monitoring on a large scale. In this paper, we present a multi-parameter sensor chip, which is miniature, low-cost, and robust, to detect the pH, conductivity, and temperature of water simultaneously. The sensor chip was fabricated using micro-electro-mechanical system (MEMS) techniques. Iridium oxide film was electrodeposited as the pH-sensing material. The atomic ratio of Ir(III) to Ir(IV) is about 1.38 according to the X-ray photoelectron spectroscopy (XPS) analysis. The pH sensing electrode showed super-Nernstian response (-67.60 mV/pH) and good linearity (R² = 0.9997), in the range of pH 2.22 to pH 11.81. KCl-agar and epoxy were used as the electrolyte layer and liquid junction for the solid-state reference electrode, respectively, and its potential stability in deionized water was 56 h. The conductivity cell exhibited a linear determination range from 21.43 μ S / cm to 1.99 mS / cm , and the electrode constant was 1.566 cm -1 . Sensitivity of the temperature sensor was 5.46 Ω / ° C . The results indicate that the developed sensor chip has potential application in water quality measurements.

Fabrication of a Miniature Multi-Parameter Sensor Chip for Water Quality Assessment

PubMed Central

Zhou, Bo; Bian, Chao; Tong, Jianhua; Xia, Shanhong

2017-01-01

Water contamination is a main inducement of human diseases. It is an important step to monitor the water quality in the water distribution system. Due to the features of large size, high cost, and complicated structure of traditional water determination sensors and devices, it is difficult to realize real-time water monitoring on a large scale. In this paper, we present a multi-parameter sensor chip, which is miniature, low-cost, and robust, to detect the pH, conductivity, and temperature of water simultaneously. The sensor chip was fabricated using micro-electro-mechanical system (MEMS) techniques. Iridium oxide film was electrodeposited as the pH-sensing material. The atomic ratio of Ir(III) to Ir(IV) is about 1.38 according to the X-ray photoelectron spectroscopy (XPS) analysis. The pH sensing electrode showed super-Nernstian response (−67.60 mV/pH) and good linearity (R2 = 0.9997), in the range of pH 2.22 to pH 11.81. KCl-agar and epoxy were used as the electrolyte layer and liquid junction for the solid-state reference electrode, respectively, and its potential stability in deionized water was 56 h. The conductivity cell exhibited a linear determination range from 21.43 μS/cm to 1.99 mS/cm, and the electrode constant was 1.566 cm−1. Sensitivity of the temperature sensor was 5.46 Ω/°C. The results indicate that the developed sensor chip has potential application in water quality measurements. PMID:28098824

New Flexible Silicone-Based EEG Dry Sensor Material Compositions Exhibiting Improvements in Lifespan, Conductivity, and Reliability

PubMed Central

Yu, Yi-Hsin; Chen, Shih-Hsun; Chang, Che-Lun; Lin, Chin-Teng; Hairston, W. David; Mrozek, Randy A.

2016-01-01

This study investigates alternative material compositions for flexible silicone-based dry electroencephalography (EEG) electrodes to improve the performance lifespan while maintaining high-fidelity transmission of EEG signals. Electrode materials were fabricated with varying concentrations of silver-coated silica and silver flakes to evaluate their electrical, mechanical, and EEG transmission performance. Scanning electron microscope (SEM) analysis of the initial electrode development identified some weak points in the sensors’ construction, including particle pull-out and ablation of the silver coating on the silica filler. The newly-developed sensor materials achieved significant improvement in EEG measurements while maintaining the advantages of previous silicone-based electrodes, including flexibility and non-toxicity. The experimental results indicated that the proposed electrodes maintained suitable performance even after exposure to temperature fluctuations, 85% relative humidity, and enhanced corrosion conditions demonstrating improvements in the environmental stability. Fabricated flat (forehead) and acicular (hairy sites) electrodes composed of the optimum identified formulation exhibited low impedance and reliable EEG measurement; some initial human experiments demonstrate the feasibility of using these silicone-based electrodes for typical lab data collection applications. PMID:27809260

Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies

PubMed Central

Potyrailo, Radislav A.; Bonam, Ravi K.; Hartley, John G.; Starkey, Timothy A.; Vukusic, Peter; Vasudev, Milana; Bunning, Timothy; Naik, Rajesh R.; Tang, Zhexiong; Palacios, Manuel A.; Larsen, Michael; Le Tarte, Laurie A.; Grande, James C.; Zhong, Sheng; Deng, Tao

2015-01-01

Combining vapour sensors into arrays is an accepted compromise to mitigate poor selectivity of conventional sensors. Here we show individual nanofabricated sensors that not only selectively detect separate vapours in pristine conditions but also quantify these vapours in mixtures, and when blended with a variable moisture background. Our sensor design is inspired by the iridescent nanostructure and gradient surface chemistry of Morpho butterflies and involves physical and chemical design criteria. The physical design involves optical interference and diffraction on the fabricated periodic nanostructures and uses optical loss in the nanostructure to enhance the spectral diversity of reflectance. The chemical design uses spatially controlled nanostructure functionalization. Thus, while quantitation of analytes in the presence of variable backgrounds is challenging for most sensor arrays, we achieve this goal using individual multivariable sensors. These colorimetric sensors can be tuned for numerous vapour sensing scenarios in confined areas or as individual nodes for distributed monitoring. PMID:26324320

Fabrication of highly selective tungsten oxide ammonia sensors

DOE Office of Scientific and Technical Information (OSTI.GOV)

Llobet, E.; Molas, G.; Molinas, P.

Tungsten oxide is shown to be a very promising material for the fabrication of highly selective ammonia sensors. Films of WO{sub 3} were deposited onto a silicon substrate by means of the drop-coating method. Then, the films were annealed in dry air at two different temperatures (300 and 400 C). X-ray photoelectron spectroscopy was used to investigate the composition of the films. Tungsten appeared both in WO{sub 2} and WO{sub 3} oxidation states, but the second state was clearly dominant. Scanning electron microscopy results showed that the oxide was amorphous or nanocrystalline. The WO{sub 3}-based devices were sensitive to ammoniamore » vapors when operated between 250 and 350 C. The optimal operating temperature for the highest sensitivity to ammonia was 300 C. Furthermore, when the devices were operated at 300 C, their sensitivity to other reducing species such as ethanol, methane, toluene, and water vapor was significantly lower, and this resulted in a high selectivity to ammonia. A model for the sensing mechanisms of the fabricated sensors is proposed.« less

Facile fabrication of CNT-based chemical sensor operating at room temperature

NASA Astrophysics Data System (ADS)

Sheng, Jiadong; Zeng, Xian; Zhu, Qi; Yang, Zhaohui; Zhang, Xiaohua

2017-12-01

This paper describes a simple, low cost and effective route to fabricate CNT-based chemical sensors, which operate at room temperature. Firstly, the incorporation of silk fibroin in vertically aligned CNT arrays (CNTA) obtained through a thermal chemical vapor deposition (CVD) method makes the direct removal of CNT arrays from substrates without any rigorous acid or sonication treatment feasible. Through a simple one-step in situ polymerization of anilines, the functionalization of CNT arrays with polyaniline (PANI) significantly improves the sensing performance of CNT-based chemical sensors in detecting ammonia (NH3) and hydrogen chloride (HCl) vapors. Chemically modified CNT arrays also show responses to organic vapors like menthol, ethyl acetate and acetone. Although the detection limits of chemically modified CNT-based chemical sensors are of the same orders of magnitudes reported in previous studies, these CNT-based chemical sensors show advantages of simplicity, low cost and energy efficiency in preparation and fabrication of devices. Additionally, a linear relationship between the relative sensitivity and concentration of analyte makes precise estimations on the concentrations of trace chemical vapors possible.

Fabrication and characterization of metal-packaged fiber Bragg grating sensor by one-step ultrasonic welding

NASA Astrophysics Data System (ADS)

Zhang, Yumin; Zhu, Lianqing; Luo, Fei; Dong, Mingli; Ding, Xiangdong; He, Wei

2016-06-01

A metallic packaging technique of fiber Bragg grating (FBG) sensors is developed for measurement of strain and temperature, and it can be simply achieved via one-step ultrasonic welding. The average strain transfer rate of the metal-packaged sensor is theoretically evaluated by a proposed model aiming at surface-bonded metallic packaging FBG. According to analytical results, the metallic packaging shows higher average strain transfer rate compared with traditional adhesive packaging under the same packaging conditions. Strain tests are performed on an elaborate uniform strength beam for both tensile and compressive strains; strain sensitivities of approximately 1.16 and 1.30 pm/μɛ are obtained for the tensile and compressive situations, respectively. Temperature rising and cooling tests are also executed from 50°C to 200°C, and the sensitivity of temperature is 36.59 pm/°C. All the measurements of strain and temperature exhibit good linearity and stability. These results demonstrate that the metal-packaged sensors can be successfully fabricated by one-step welding technique and provide great promise for long-term and high-precision structural health monitoring.

Fabrication of diamond based sensors for use in extreme environments

DOE PAGES

Samudrala, Gopi K.; Moore, Samuel L.; Vohra, Yogesh K.

2015-04-23

Electrical and magnetic sensors can be lithographically fabricated on top of diamond substrates and encapsulated in a protective layer of chemical vapor deposited single crystalline diamond. This process when carried out on single crystal diamond anvils employed in high pressure research is termed as designer diamond anvil fabrication. These designer diamond anvils allow researchers to study electrical and magnetic properties of materials under extreme conditions without any possibility of damaging the sensing elements. We describe a novel method for the fabrication of designer diamond anvils with the use of maskless lithography and chemical vapor deposition in this paper. This methodmore » can be utilized to produce diamond based sensors which can function in extreme environments of high pressures, high and low temperatures, corrosive and high radiation conditions. Here, we demonstrate applicability of these diamonds under extreme environments by performing electrical resistance measurements during superconducting transition in rare earth doped iron-based compounds under high pressures to 12 GPa and low temperatures to 10 K.« less

Fabrication of diamond based sensors for use in extreme environments

DOE Office of Scientific and Technical Information (OSTI.GOV)

Samudrala, Gopi K.; Moore, Samuel L.; Vohra, Yogesh K.

Electrical and magnetic sensors can be lithographically fabricated on top of diamond substrates and encapsulated in a protective layer of chemical vapor deposited single crystalline diamond. This process when carried out on single crystal diamond anvils employed in high pressure research is termed as designer diamond anvil fabrication. These designer diamond anvils allow researchers to study electrical and magnetic properties of materials under extreme conditions without any possibility of damaging the sensing elements. We describe a novel method for the fabrication of designer diamond anvils with the use of maskless lithography and chemical vapor deposition in this paper. This methodmore » can be utilized to produce diamond based sensors which can function in extreme environments of high pressures, high and low temperatures, corrosive and high radiation conditions. Here, we demonstrate applicability of these diamonds under extreme environments by performing electrical resistance measurements during superconducting transition in rare earth doped iron-based compounds under high pressures to 12 GPa and low temperatures to 10 K.« less

Fabrication of a Flexible Amperometric Glucose Sensor Using Additive Processes

PubMed Central

Du, Xiaosong; Durgan, Christopher J.; Matthews, David J.; Motley, Joshua R.; Tan, Xuebin; Pholsena, Kovit; Árnadóttir, Líney; Castle, Jessica R.; Jacobs, Peter G.; Cargill, Robert S.; Ward, W. Kenneth; Conley, John F.; Herman, Gregory S.

2015-01-01

This study details the use of printing and other additive processes to fabricate a novel amperometric glucose sensor. The sensor was fabricated using a Au coated 12.7 μm thick polyimide substrate as a starting material, where micro-contact printing, electrochemical plating, chloridization, electrohydrodynamic jet (e-jet) printing, and spin coating were used to pattern, deposit, chloridize, print, and coat functional materials, respectively. We have found that e-jet printing was effective for the deposition and patterning of glucose oxidase inks with lateral feature sizes between ~5 to 1000 μm in width, and that the glucose oxidase was still active after printing. The thickness of the permselective layer was optimized to obtain a linear response for glucose concentrations up to 32 mM and no response to acetaminophen, a common interfering compound, was observed. The use of such thin polyimide substrates allow wrapping of the sensors around catheters with high radius of curvature ~250 μm, where additive and microfabrication methods may allow significant cost reductions. PMID:26634186

Fabrication of nitric oxide-releasing polyurethane glucose sensor membranes

PubMed Central

Koh, Ahyeon; Riccio, Daniel A.; Sun, Bin; Carpenter, Alexis W.; Nichols, Scott P.; Schoenfisch, Mark H.

2011-01-01

Despite clear evidence that polymeric nitric oxide (NO) release coatings reduce the foreign body response (FBR) and may thus improve the analytical performance of in vivo continuous glucose monitoring devices when used as sensor membranes, the compatibility of the NO release chemistry with that required for enzymatic glucose sensing remains unclear. Herein, we describe the fabrication and characterization of NO-releasing polyurethane sensor membranes using NO donor-modified silica vehicles embedded within the polymer. In addition to demonstrating tunable NO release as a function of the NO donor silica scaffold and polymer compositions and concentrations, we describe the impact of the NO release vehicle and its release kinetics on glucose sensor performance. PMID:21795038

Cost-effective MEMS piezoresistive cantilever-based sensor fabrication for gait movement analysis

NASA Astrophysics Data System (ADS)

Saadon, Salem; Anuar, A. F. M.; Wahab, Yufridin

2017-03-01

The conventional photolithography of crystalline silicon technique is limited to two-dimensional and structure scaling. It's also requiring a lot of time and chemical involves for the whole process. These problems can be overcome by using laser micromachining technique, that capable to produce three-dimensional structure and simultaneously avoiding the photo mask needs. In this paper, we reported on the RapidX-250 Excimer laser micromachining with 248 nm KrF to create in-time mask design and assisting in the fabrication process of piezo-resistive micro cantilever structures. Firstly, laser micromachining parameters have been investigated in order to fabricate the acceleration sensor to analyzing human gait movement. Preliminary result shows that the fabricated sensor able to define the movement difference of human motion regarding the electrical characteristic of piezo-resistor.

Fabrication and characterization of artificial hair cell sensor based on MWCNT-PDMS composite

NASA Astrophysics Data System (ADS)

Kim, Chi Yeon; Lee, Hyun Sup; Cho, Yo Han; Joh, Cheeyoung; Choi, Pyung; Park, Seong Jin

2011-06-01

The aim of this work is to design and fabricate a flow sensor using an artificial hair cell (AHC) inspired by biological hair cells of fish. The sensor consists of a single cilium structure with high aspect ratio and a mechanoreceptor using force sensitive resistor (FSR). The cilium structure is designed for capturing a drag force with direction due to flow field around the sensor and the mechanoreceptor is designed for sensing the drag force with direction from the cilium structure and converting it into an electric signal. The mechanoreceptor has a symmetric four electrodes to sense the drag force and its direction. To fabricate the single cilium structure with high aspect ratio, we have proposed a new design concept using a separated micro mold system (SMS) fabricated by the LIGA process. For a successful replication of the cilium structure, we used the hot embossing process with the help of a double-sided mold system. We used a composite of multiwall carbon nanotube and polydimethylsiloxane (MWCNT-PDMS). The performance of the mechanoreceptors was measured by a computer-controlled nanoindenter. We carried out several experiments with the sensor in the different flow rate and direction using the experimental test apparatus. To calibrate the sensor and calculate the velocity with direction based the signal from the sensor, we analyzed the coupled phenomena between flow field and the cilium structure to calculate the deflection of the cilium structure and the drag force applying to the cilium structure due to the flow field around sensor.

Dynamics, Control, and Fabrication of Micro Embedded Heaters and Sensors for Micro SMA Active Endoscopes

NASA Astrophysics Data System (ADS)

Aphanuphong, Sutha

This research investigates design and control of an active catheter for minimally invasive medical procedures. Microfabrication techniques are developed and several prototypes were constructed. The understanding and analysis results from each design iteration are utilized to improve the overall design and the performance of each revision. An innovative co-fabrication method is explored to simplify the fabrication process and also improve the quality, repeatability, and reliability of the active catheter. This co-fabrication method enables a unique compact integrated heater and sensor film to be directly constructed on a shape memory alloy (SMA) sheet and to be utilized as an outline mask to pattern a micro SMA actuator. There are two functions integrated in the sensor film: heat sources to actuate the micro SMA actuator and sensors to provide temperature and strain of the active catheter to closed-loop control algorithms. Three main aspects are explored in this dissertation: thermal dynamics in the MicroFlex (muF) film and its effect on the sensor capabilities; non-minimum phase behavior and its effect on control performance, and film micro fabrication design and its effect on thermal dynamics. The sensor film developed from this understanding is able to deliver excellent heating and sensing performance with a simple design.

Batch Fabrication of Ultrasensitive Carbon Nanotube Hydrogen Sensors with Sub-ppm Detection Limit.

PubMed

Xiao, Mengmeng; Liang, Shibo; Han, Jie; Zhong, Donglai; Liu, Jingxia; Zhang, Zhiyong; Peng, Lianmao

2018-04-27

Carbon nanotube (CNT) has been considered as an ideal channel material for building highly sensitive gas sensors. However, the reported H 2 sensors based on CNT always suffered from the low sensitivity or low production. We developed the technology to massively fabricate ultra-highly sensitive H 2 sensors based on solution derived CNT network through comprehensive optimization of the CNT material, device structure, and fabrication process. In the H 2 sensors, high semiconducting purity solution-derived CNT film sorted by poly[9-(1-octylonoyl)-9 H-carbazole-2,7-diyl](PCz) is used as the main channel, which is decorated with Pd nanoparticles as functionalization for capturing H 2 . Meanwhile, Ti contacts are used to form a Schottky barrier for enhancing transferred charge-induced resistance change, and then a response of resistance change by 3 orders of magnitude is achieved at room temperature under the concentration of ∼311 ppm with a very fast response time of approximately 7 s and a detection limit of 890 ppb, which is the highest response to date for CNT H 2 sensors and the very first time to show the sub-ppm detection for H 2 at room temperature. Furthermore, the detection limit concentration can be improved to 89 ppb at 100 °C. The batch fabrication of CNT film H 2 sensors with ultra-high sensitivity and high uniformity is ready to promote CNT devices to application for the first time in some specialized field.

Fabrication of fiber-optic localized surface plasmon resonance sensor and its application to detect antibody-antigen reaction of interferon-gamma

NASA Astrophysics Data System (ADS)

Jeong, Hyeon-Ho; Erdene, Norov; Lee, Seung-Ki; Jeong, Dae-Hong; Park, Jae-Hyoung

2011-12-01

A fiber-optic localized surface plasmon (FO LSPR) sensor was fabricated by gold nanoparticles (Au NPs) immobilized on the end-face of an optical fiber. When Au NPs were formed on the end-face of an optical fiber by chemical reaction, Au NPs aggregation occurred and the Au NPs were immobilized in various forms such as monomers, dimers, trimers, etc. The component ratio of the Au NPs on the end-face of the fabricated FO LSPR sensor was slightly changed whenever the sensors were fabricated in the same condition. Including this phenomenon, the FO LSPR sensor was fabricated with high sensitivity by controlling the density of Au NPs. Also, the fabricated sensors were measured for the resonance intensity for the different optical systems and analyzed for the effect on sensitivity. Finally, for application as a biosensor, the sensor was used for detecting the antibody-antigen reaction of interferon-gamma.

Design, fabrication and testing of an optical temperature sensor

NASA Technical Reports Server (NTRS)

Morey, W. W.; Glenn, W. H.; Decker, R. O.; Mcclurg, W. C.

1980-01-01

The laboratory breadboard optical temperature sensor based on the temperature dependent absorptive characteristics of a rare earth (europium) doped optical fiber. The principles of operation, materials characterization, fiber and optical component design, design and fabrication of an electrooptic interface unit, signal processing, and initial test results are discussed. Initial tests indicated that, after a brief warmup period, the output of the sensor was stable to approximately 1 C at room temperature or approximately + or - 0.3 percent of point (K). This exceeds the goal of 1 percent of point. Recommendations are presented for further performance improvement.

Multivariable passive RFID vapor sensors: roll-to-roll fabrication on a flexible substrate.

PubMed

Potyrailo, Radislav A; Burns, Andrew; Surman, Cheryl; Lee, D J; McGinniss, Edward

2012-06-21

We demonstrate roll-to-roll (R2R) fabrication of highly selective, battery-free radio frequency identification (RFID) sensors on a flexible polyethylene terephthalate (PET) polymeric substrate. Selectivity of our developed RFID sensors is provided by measurements of their resonance impedance spectra, followed by the multivariate analysis of spectral features, and correlation of these spectral features to the concentrations of vapors of interest. The multivariate analysis of spectral features also provides the ability for the rejection of ambient interferences. As a demonstration of our R2R fabrication process, we employed polyetherurethane (PEUT) as a "classic" sensing material, extruded this sensing material as 25, 75, and 125-μm thick films, and thermally laminated the films onto RFID inlays, rapidly producing approximately 5000 vapor sensors. We further tested these RFID vapor sensors for their response selectivity toward several model vapors such as toluene, acetone, and ethanol as well as water vapor as an abundant interferent. Our RFID sensing concept features 16-bit resolution provided by the sensor reader, granting a highly desired independence from costly proprietary RFID memory chips with a low-resolution analog input. Future steps are being planned for field-testing of these sensors in numerous conditions.

Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch.

PubMed

Lu, Fei; Wang, Haixing; Guo, Yanjie; Tan, Qiulin; Zhang, Wendong; Xiong, Jijun

2018-01-16

A wireless and passive temperature sensor operating up to 800 °C is proposed. The sensor is based on microwave backscatter RFID (radio frequency identification) technology. A thin-film planar structure and simple working principle make the sensor easy to operate under high temperature. In this paper, the proposed high temperature sensor was designed, fabricated, and characterized. Here the 99% alumina ceramic with a dimension of 40 mm × 40 mm × 1 mm was prepared in micromechanics for fabrication of the sensor substrate. The metallization of the Au slot patch was realized in magnetron sputtering with a slot width of 2 mm and a slot length of 32 mm. The measured resonant frequency of the sensor at 25 °C is 2.31 GHz. It was concluded that the resonant frequency decreases with the increase in the temperature in range of 25-800 °C. It was shown that the average sensor sensitivity is 101.94 kHz/°C.

Advanced Packaging Technology Used in Fabricating a High-Temperature Silicon Carbide Pressure Sensor

NASA Technical Reports Server (NTRS)

Beheim, Glenn M.

2003-01-01

The development of new aircraft engines requires the measurement of pressures in hot areas such as the combustor and the final stages of the compressor. The needs of the aircraft engine industry are not fully met by commercially available high-temperature pressure sensors, which are fabricated using silicon. Kulite Semiconductor Products and the NASA Glenn Research Center have been working together to develop silicon carbide (SiC) pressure sensors for use at high temperatures. At temperatures above 850 F, silicon begins to lose its nearly ideal elastic properties, so the output of a silicon pressure sensor will drift. SiC, however, maintains its nearly ideal mechanical properties to extremely high temperatures. Given a suitable sensor material, a key to the development of a practical high-temperature pressure sensor is the package. A SiC pressure sensor capable of operating at 930 F was fabricated using a newly developed package. The durability of this sensor was demonstrated in an on-engine test. The SiC pressure sensor uses a SiC diaphragm, which is fabricated using deep reactive ion etching. SiC strain gauges on the surface of the diaphragm sense the pressure difference across the diaphragm. Conventionally, the SiC chip is mounted to the package with the strain gauges outward, which exposes the sensitive metal contacts on the chip to the hostile measurement environment. In the new Kulite leadless package, the SiC chip is flipped over so that the metal contacts are protected from oxidation by a hermetic seal around the perimeter of the chip. In the leadless package, a conductive glass provides the electrical connection between the pins of the package and the chip, which eliminates the fragile gold wires used previously. The durability of the leadless SiC pressure sensor was demonstrated when two 930 F sensors were tested in the combustor of a Pratt & Whitney PW4000 series engine. Since the gas temperatures in these locations reach 1200 to 1300 F, the sensors were

Fabrication and characterization of optical sensors using metallic core-shell thin film nanoislands for ozone detection

NASA Astrophysics Data System (ADS)

Addanki, Satish; Nedumaran, D.

2017-07-01

Core-Shell nanostructures play a vital role in the sensor field owing to their performance improvements in sensing characteristics and well-established synthesis procedures. These nanostructures can be ingeniously tuned to achieve tailored properties for a particular application of interest. In this work, an Ag-Au core-shell thin film nanoislands with APTMS (3-Aminopropyl trimethoxysilane) and PVA (Polyvinyl alcohol) binding agents was modeled, synthesized and characterized. The simulation results were used to fabricate the sensor through chemical route. The results of this study confirmed that the APTMS based Ag-Au core-shell thin film nanoislands offered a better performance over the PVA based Ag-Au core-shell thin film nanoislands. Also, the APTMS based Ag-Au core-shell thin film nanoislands exhibited better sensitivity towards ozone sensing over the other types, viz., APTMS/PVA based Au-Ag core-shell and standalone Au/Ag thin film nanoislands.

Fabrication and Characterization of a Nanocoax-Based Electrochemical Sensor

NASA Astrophysics Data System (ADS)

Rizal, Binod; Archibald, Michelle M.; Naughton, Jeffrey R.; Connolly, Timothy; Shepard, Stephen C.; Burns, Michael J.; Chiles, Thomas C.; Naughton, Michael J.

2014-03-01

We used an imprint lithography process to fabricate three dimensional electrochemical sensors comprising arrays of vertically-oriented coaxial electrodes, with the coax cores and shields serving as working and counter electrodes, respectively, and with nanoscale separation gaps.[2] Arrays of devices with different electrode gaps (coax annuli) were prepared, yielding increasing sensitivity with decreasing annulus thickness. A coax-based sensor with a 100 nm annulus was found to have sensitivity 100 times greater than that of a conventional planar sensor control, which had millimeter-scale electrode gap spacing. We suggest that this enhancement is due to an increase in the diffusion of molecules between electrodes, which improves the current per unit surface area compared to the planar device. Supported by NIH (National Cancer Institute and the National Institute of Allergy and Infectious Diseases).

Fabrication and Characterization of a CMOS-MEMS Humidity Sensor.

PubMed

Dennis, John-Ojur; Ahmed, Abdelaziz-Yousif; Khir, Mohd-Haris

2015-07-10

This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of humidity on the active material layer of titanium dioxide (TiO2) nanoparticles deposited on the moving plate, which results in changes in the mass of the device. The sensor has been designed and fabricated through a standard 0.35 µm CMOS process technology and post-CMOS micromachining technique has been successfully implemented to release the MEMS structures. The sensor is operated in the dynamic mode using electrothermal actuation and the output signal measured using a piezoresistive (PZR) sensor connected in a Wheatstone bridge circuit. The output voltage of the humidity sensor increases from 0.585 mV to 30.580 mV as the humidity increases from 35% RH to 95% RH. The output voltage is found to be linear from 0.585 mV to 3.250 mV as the humidity increased from 35% RH to 60% RH, with sensitivity of 0.107 mV/% RH; and again linear from 3.250 mV to 30.580 mV as the humidity level increases from 60% RH to 95% RH, with higher sensitivity of 0.781 mV/% RH. On the other hand, the sensitivity of the humidity sensor increases linearly from 0.102 mV/% RH to 0.501 mV/% RH with increase in the temperature from 40 °C to 80 °C and a maximum hysteresis of 0.87% RH is found at a relative humidity of 80%. The sensitivity is also frequency dependent, increasing from 0.500 mV/% RH at 2 Hz to reach a maximum value of 1.634 mV/% RH at a frequency of 12 Hz, then decreasing to 1.110 mV/% RH at a frequency of 20 Hz. Finally, the CMOS-MEMS humidity sensor showed comparable response, recovery, and repeatability of measurements in three cycles as compared to a standard sensor that directly

Fabrication and Characterization of a CMOS-MEMS Humidity Sensor

PubMed Central

Dennis, John-Ojur; Ahmed, Abdelaziz-Yousif; Khir, Mohd-Haris

2015-01-01

This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of humidity on the active material layer of titanium dioxide (TiO2) nanoparticles deposited on the moving plate, which results in changes in the mass of the device. The sensor has been designed and fabricated through a standard 0.35 µm CMOS process technology and post-CMOS micromachining technique has been successfully implemented to release the MEMS structures. The sensor is operated in the dynamic mode using electrothermal actuation and the output signal measured using a piezoresistive (PZR) sensor connected in a Wheatstone bridge circuit. The output voltage of the humidity sensor increases from 0.585 mV to 30.580 mV as the humidity increases from 35% RH to 95% RH. The output voltage is found to be linear from 0.585 mV to 3.250 mV as the humidity increased from 35% RH to 60% RH, with sensitivity of 0.107 mV/% RH; and again linear from 3.250 mV to 30.580 mV as the humidity level increases from 60% RH to 95% RH, with higher sensitivity of 0.781 mV/% RH. On the other hand, the sensitivity of the humidity sensor increases linearly from 0.102 mV/% RH to 0.501 mV/% RH with increase in the temperature from 40 °C to 80 °C and a maximum hysteresis of 0.87% RH is found at a relative humidity of 80%. The sensitivity is also frequency dependent, increasing from 0.500 mV/% RH at 2 Hz to reach a maximum value of 1.634 mV/% RH at a frequency of 12 Hz, then decreasing to 1.110 mV/% RH at a frequency of 20 Hz. Finally, the CMOS-MEMS humidity sensor showed comparable response, recovery, and repeatability of measurements in three cycles as compared to a standard sensor that directly

Biomimetic micromechanical adaptive flow-sensor arrays

NASA Astrophysics Data System (ADS)

Krijnen, Gijs; Floris, Arjan; Dijkstra, Marcel; Lammerink, Theo; Wiegerink, Remco

2007-05-01

We report current developments in biomimetic flow-sensors based on flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. In this work we describe hair-sensors fabricated by a combination of sacrificial poly-silicon technology, to form silicon-nitride suspended membranes, and SU8 polymer processing for fabrication of hairs with diameters of about 50 μm and up to 1 mm length. The membranes have thin chromium electrodes on top forming variable capacitors with the substrate that allow for capacitive read-out. Previously these sensors have been shown to exhibit acoustic sensitivity. Like for the crickets, the MEMS hair-sensors are positioned on elongated structures, resembling the cercus of crickets. In this work we present optical measurements on acoustically and electrostatically excited hair-sensors. We present adaptive control of flow-sensitivity and resonance frequency by electrostatic spring stiffness softening. Experimental data and simple analytical models derived from transduction theory are shown to exhibit good correspondence, both confirming theory and the applicability of the presented approach towards adaptation.

High-throughput fabrication and screening improves gold nanoparticle chemiresistor sensor performance.

PubMed

Hubble, Lee J; Cooper, James S; Sosa-Pintos, Andrea; Kiiveri, Harri; Chow, Edith; Webster, Melissa S; Wieczorek, Lech; Raguse, Burkhard

2015-02-09

Chemiresistor sensor arrays are a promising technology to replace current laboratory-based analysis instrumentation, with the advantage of facile integration into portable, low-cost devices for in-field use. To increase the performance of chemiresistor sensor arrays a high-throughput fabrication and screening methodology was developed to assess different organothiol-functionalized gold nanoparticle chemiresistors. This high-throughput fabrication and testing methodology was implemented to screen a library consisting of 132 different organothiol compounds as capping agents for functionalized gold nanoparticle chemiresistor sensors. The methodology utilized an automated liquid handling workstation for the in situ functionalization of gold nanoparticle films and subsequent automated analyte testing of sensor arrays using a flow-injection analysis system. To test the methodology we focused on the discrimination and quantitation of benzene, toluene, ethylbenzene, p-xylene, and naphthalene (BTEXN) mixtures in water at low microgram per liter concentration levels. The high-throughput methodology identified a sensor array configuration consisting of a subset of organothiol-functionalized chemiresistors which in combination with random forests analysis was able to predict individual analyte concentrations with overall root-mean-square errors ranging between 8-17 μg/L for mixtures of BTEXN in water at the 100 μg/L concentration. The ability to use a simple sensor array system to quantitate BTEXN mixtures in water at the low μg/L concentration range has direct and significant implications to future environmental monitoring and reporting strategies. In addition, these results demonstrate the advantages of high-throughput screening to improve the performance of gold nanoparticle based chemiresistors for both new and existing applications.

Activity recognition with wearable sensors on loose clothing

PubMed Central

Howard, Matthew

2017-01-01

Observing human motion in natural everyday environments (such as the home), has evoked a growing interest in the development of on-body wearable sensing technology. However, wearable sensors suffer from motion artefacts introduced by the non-rigid attachment of sensors to the body, and the prevailing view is that it is necessary to eliminate these artefacts. This paper presents findings that suggest that these artefacts can, in fact, be used to distinguish between similar motions, by exploiting additional information provided by the fabric motion. An experimental study is presented whereby factors of both the motion and the properties of the fabric are analysed in the context of motion similarity. It is seen that while standard rigidly attached sensors have difficultly in distinguishing between similar motions, sensors mounted onto fabric exhibit significant differences (p < 0.01). An evaluation of the physical properties of the fabric shows that the stiffness of the material plays a role in this, with a trade-off between additional information and extraneous motion. This effect is evaluated in an online motion classification task, and the use of fabric-mounted sensors demonstrates an increase in prediction accuracy over rigidly attached sensors. PMID:28976978

Activity recognition with wearable sensors on loose clothing.

PubMed

Michael, Brendan; Howard, Matthew

2017-01-01

Observing human motion in natural everyday environments (such as the home), has evoked a growing interest in the development of on-body wearable sensing technology. However, wearable sensors suffer from motion artefacts introduced by the non-rigid attachment of sensors to the body, and the prevailing view is that it is necessary to eliminate these artefacts. This paper presents findings that suggest that these artefacts can, in fact, be used to distinguish between similar motions, by exploiting additional information provided by the fabric motion. An experimental study is presented whereby factors of both the motion and the properties of the fabric are analysed in the context of motion similarity. It is seen that while standard rigidly attached sensors have difficultly in distinguishing between similar motions, sensors mounted onto fabric exhibit significant differences (p < 0.01). An evaluation of the physical properties of the fabric shows that the stiffness of the material plays a role in this, with a trade-off between additional information and extraneous motion. This effect is evaluated in an online motion classification task, and the use of fabric-mounted sensors demonstrates an increase in prediction accuracy over rigidly attached sensors.

Fabrication of selective chemical sensor with ternary ZnO/SnO2/Yb2O3 nanoparticles.

PubMed

Rahman, Mohammed M; Alam, M M; Asiri, Abdullah M; Islam, M A

2017-08-01

Construction of highly efficient toxic chemical sensors is the key approach for the determination of carcinogenic chemicals in the environment and ecosystem. We report here, an efficient acetone chemical sensor based on the analytical performances such as sensitivity, lower-detection limit, reproducibility, and good linearity. The proposed acetone-detecting electrode was introduced by the implementation of ZnO/SnO 2 /Yb 2 O 3 nanoparticles (NPs) as a successful electron mediator with glassy carbon electrode (GCE) assembly. The prepared NPs of ZnO/SnO 2 /Yb 2 O 3 were well crystalline-doped nanomaterial and produced by implementation of hydrothermal procedure at low temperature. The conventional methods such as Fourier-transform infrared spectroscopy (FTIR), ultraviolet visible spectroscopy (UV/vis), field emission scanning electron microscopy (FESEM), X-ray photoelectron spectroscopy (XPS), energy-dispersive X-ray spectroscopy (EDS), and powder x-ray diffraction (XRD) were utilized for characterization of prepared NPs in terms of morphological, elemental, optical and structural properties. The large linear dynamic range (LDR) of 0.34nmolL -1 to 3.4mmolL -1 with lower detection limit (S/N=3) of 0.05±0.002nmolL -1 and a higher sensitivity of 17.09µAmmolL -1 cm -2 were exhibited by lab-made fabricated sensor based on ZnO/SnO 2 /Yb 2 O 3 NPs for selective acetone detection. In shortly, the ZnO/SnO 2 /Yb 2 O 3 NPs are utilized as an excellent electron mediator with Nafion/GCE assembly in a chemical sensor for acetone detection even at the very low concentration. Therefore, the chemical sensor is fabricated with ZnO/SnO 2 /Yb 2 O 3 NPs may be a promising highly sensitive sensor by reliable I-V detection method for the effective detection of hazardous and carcinogenic chemicals in medical as well as health-care fields. Copyright © 2017 Elsevier B.V. All rights reserved.

Analysis, design, fabrication and testing of an optical tip clearance sensor. [turbocompressor blade tips

NASA Technical Reports Server (NTRS)

Poppel, G. L.; Marple, D. T. F.; Kingsley, J. D.

1981-01-01

Analyses and the design, fabrication, and testing of an optical tip clearance sensor with intended application in aircraft propulsion control systems are reported. The design of a sensor test rig, evaluation of optical sensor components at elevated temperatures, sensor design principles, sensor test results at room temperature, and estimations of sensor accuracy at temperatures of an aircraft engine environment are discussed. Room temperature testing indicated possible measurement accuracies of less than 12.7 microns (0.5 mils). Ways to improve performance at engine operating temperatures are recommended. The potential of this tip clearance sensor is assessed.

3D printed stretchable capacitive sensors for highly sensitive tactile and electrochemical sensing

NASA Astrophysics Data System (ADS)

Li, Kai; Wei, Hong; Liu, Wenguang; Meng, Hong; Zhang, Peixin; Yan, Chaoyi

2018-05-01

Developments of innovative strategies for the fabrication of stretchable sensors are of crucial importance for their applications in wearable electronic systems. In this work, we report the successful fabrication of stretchable capacitive sensors using a novel 3D printing method for highly sensitive tactile and electrochemical sensing applications. Unlike conventional lithographic or templated methods, the programmable 3D printing technique can fabricate complex device structures in a cost-effective and facile manner. We designed and fabricated stretchable capacitive sensors with interdigital and double-vortex designs and demonstrated their successful applications as tactile and electrochemical sensors. Especially, our stretchable sensors exhibited a detection limit as low as 1 × 10-6 M for NaCl aqueous solution, which could have significant potential applications when integrated in electronics skins.

Structure and Fabrication of a Microscale Flow-Rate/Skin Friction Sensor

NASA Technical Reports Server (NTRS)

Chandrasekharan, Vijay (Inventor); Sells, Jeremy (Inventor); Sheplak, Mark (Inventor); Arnold, David P. (Inventor)

2014-01-01

A floating element shear sensor and method for fabricating the same are provided. According to an embodiment, a microelectromechanical systems (MEMS)-based capacitive floating element shear stress sensor is provided that can achieve time-resolved turbulence measurement. In one embodiment, a differential capacitive transduction scheme is used for shear stress measurement. The floating element structure for the differential capacitive transduction scheme incorporates inter digitated comb fingers forming differential capacitors, which provide electrical output proportional to the floating element deflection.

Fabrication of Ultrasensitive Transition Edge Sensor Bolometric Detectors for HIRMES

NASA Technical Reports Server (NTRS)

Brown, Ari-David; Brekosky, Regis; Franz, David; Hsieh, Wen-Ting; Kutyrev, Alexander; Mikula, Vilem; Miller, Timothy; Moseley, S. Harvey; Oxborrow, Joseph; Rostem, Karwan;

Graphene based strain sensor with LCP substrate

NASA Astrophysics Data System (ADS)

Nie, M.; Yang, H. S.; Xia, Y. H.

2018-02-01

A flexible strain sensor constructed by an efficient, low-cost fabrication strategy is presented in this paper. It is assembled by adhering grid-like graphene on LCP substrate. Kinds of measurement setup have been designed to verify that the proposed flexible sensor device is suitable to be used in health monitoring system. From the experiment results, it can be proved that the sensor exhibits the following features: ultra-light, relatively good sensitivity, high reversibility, superior physical robustness, easy fabrication. With the great performance of this flexible strain sensor, it is considered to play an important role in body monitoring, structural health monitoring system, fatigue detection and healthcare systems in the near future.

Fabrication of Organic Transistors Using Nanomaterials for Sensing Applications

NASA Astrophysics Data System (ADS)

Harb, Mohamed E.; Ebrahim, Shaker; Soliman, Moataz; Shabana, Mahmoud

2018-01-01

In this work, an organic field-effect transistor (OFET) was fabricated and characterized based on the bottom contact of a polyaniline (PANI) or PANI/TiO2 nanocomposite as an active layer and SiO2 as an insulating layer to be used for ammonia gas sensing applications. The OFET sensors exhibited a change in the drain current when exposed to NH3. Titanium dioxide (TiO2) nanoparticles with different weight percentages (0-50 wt.%) were added to dope PANI and enhance charge carrier transport, although the response of both the PANI OFET sensor and PANI/TiO2 OFET sensor has reached saturation value at almost the same period. The response of PANI/TiO2 transistor is (2.5), which is much higher than that of PANI (0.17). The results showed that the sensor response of the OFET device fabricated with PANI/TiO2 is 15 times greater than that with an OFET device fabricated using pristine PANI.

Oxazine-based sensor for contaminant detection, fabrication method therefor, and uses thereof

DOEpatents

Nnanna, Agbai Agwu; Jalal, Ahmed Hasnian

2014-05-27

A sensor, a method for its fabrication, and a method for its use to detect contaminants, for example, ammonia, in stagnant and dynamic fluid media, especially liquid media. The sensor is an opto-chemical sensor that includes a polymer optical fiber, a sensing layer comprising oxazine 170 perchlorate on the polymer optical fiber, and a membrane layer on the sensing layer. The membrane layer is gas permeable and not permeable to the fluid in the fluid system, and moisture is entrapped by and between the sensing and membrane layers.

Fabrication and characterization of aerosol-jet printed strain sensors for multifunctional composite structures

NASA Astrophysics Data System (ADS)

Zhao, Da; Liu, Tao; Zhang, Mei; Liang, Richard; Wang, Ben

2012-11-01

Traditional multifunctional composite structures are produced by embedding parasitic parts, such as foil sensors, optical fibers and bulky connectors. As a result, the mechanical properties of the composites, especially the interlaminar shear strength (ILSS), could be largely undermined. In the present study, we demonstrated an innovative aerosol-jet printing technology for printing electronics inside composite structures without degrading the mechanical properties. Using the maskless fine feature deposition (below 10 μm) characteristics of this printing technology and a pre-cure protocol, strain sensors were successfully printed onto carbon fiber prepregs to enable fabricating composites with intrinsic sensing capabilities. The degree of pre-cure of the carbon fiber prepreg on which strain sensors were printed was demonstrated to be critical. Without pre-curing, the printed strain sensors were unable to remain intact due to the resin flow during curing. The resin flow-induced sensor deformation can be overcome by introducing 10% degree of cure of the prepreg. In this condition, the fabricated composites with printed strain sensors showed almost no mechanical degradation (short beam shearing ILSS) as compared to the control samples. Also, the failure modes examined by optical microscopy showed no difference. The resistance change of the printed strain sensors in the composite structures were measured under a cyclic loading and proved to be a reliable mean strain gauge factor of 2.2 ± 0.06, which is comparable to commercial foil metal strain gauge.

Fabrications and Performance of Wireless LC Pressure Sensors through LTCC Technology.

PubMed

Lin, Lin; Ma, Mingsheng; Zhang, Faqiang; Liu, Feng; Liu, Zhifu; Li, Yongxiang

2018-01-25

This paper presents a kind of passive wireless pressure sensor comprised of a planar spiral inductor and a cavity parallel plate capacitor fabricated through low-temperature co-fired ceramic (LTCC) technology. The LTCC material with a low Young's modulus of ~65 GPa prepared by our laboratory was used to obtain high sensitivity. A three-step lamination process was applied to construct a high quality cavity structure without using any sacrificial materials. The effects of the thickness of the sensing membranes on the sensitivity and detection range of the pressure sensors were investigated. The sensor with a 148 μm sensing membrane showed the highest sensitivity of 3.76 kHz/kPa, and the sensor with a 432 μm sensing membrane presented a high detection limit of 2660 kPa. The tunable sensitivity and detection limit of the wireless pressure sensors can meet the requirements of different scenes.

Wireless implantable passive strain sensor: design, fabrication and characterization

NASA Astrophysics Data System (ADS)

Umbrecht, F.; Wägli, P.; Dechand, S.; Gattiker, F.; Neuenschwander, J.; Sennhauser, U.; Hierold, Ch

2010-08-01

This work presents a new passive sensor concept for monitoring the deformation of orthopedic implants. The novel sensing principle of the WIPSS (wireless implantable passive strain sensor) is based on a hydro-mechanical amplification effect. The WIPSS is entirely made from biocompatible PMMA and consists of a microchannel attached to a reservoir, which is filled with an incompressible fluid. As the reservoir is exposed to strain, its volume changes and consequently the fill level inside the microchannel varies. The wireless detection of the microchannel's strain-dependent fill level is based on ultrasound. The WIPSS' sensing principle is proved by finite-element simulations and the reservoir's design is optimized toward maximum volume change, in order to achieve high sensitivity. A fabrication process for WIPSS sensor devices entirely made from PMMA is presented. The obtained measurement results confirmed the sensor's functionality and showed very good agreement with the obtained results of the conducted FE simulations regarding the sensor's sensitivity. A strain resolution of 1.7 ± 0.2 × 10-5 was achieved. Further, the determination of the cross-sensitivity to temperature and strains applied out of the sensing direction is presented. The response to dynamic inputs (0.1-5 Hz) has been measured and showed decreasing sensor output with increasing frequency. Test structures of the sensor device allow the application of a signal bandwidth up to 1 Hz. Therefore, the proposed sensor concept of the WIPSS presents a promising new sensor system for static in vivo strain monitoring of orthopedic implants. In combination with the developed ultrasound-based read-out method, this new sensor system offers the potential of wireless sensor read-out with medical ultrasound scanners, which are commercially available.

3D printed stretchable capacitive sensors for highly sensitive tactile and electrochemical sensing.

PubMed

Li, Kai; Wei, Hong; Liu, Wenguang; Meng, Hong; Zhang, Peixin; Yan, Chaoyi

2018-05-04

Developments of innovative strategies for the fabrication of stretchable sensors are of crucial importance for their applications in wearable electronic systems. In this work, we report the successful fabrication of stretchable capacitive sensors using a novel 3D printing method for highly sensitive tactile and electrochemical sensing applications. Unlike conventional lithographic or templated methods, the programmable 3D printing technique can fabricate complex device structures in a cost-effective and facile manner. We designed and fabricated stretchable capacitive sensors with interdigital and double-vortex designs and demonstrated their successful applications as tactile and electrochemical sensors. Especially, our stretchable sensors exhibited a detection limit as low as 1 × 10 -6 M for NaCl aqueous solution, which could have significant potential applications when integrated in electronics skins.

A Review of Artificial Lateral Line in Sensor Fabrication and Bionic Applications for Robot Fish.

PubMed

Liu, Guijie; Wang, Anyi; Wang, Xinbao; Liu, Peng

2016-01-01

Lateral line is a system of sense organs that can aid fishes to maneuver in a dark environment. Artificial lateral line (ALL) imitates the structure of lateral line in fishes and provides invaluable means for underwater-sensing technology and robot fish control. This paper reviews ALL, including sensor fabrication and applications to robot fish. The biophysics of lateral line are first introduced to enhance the understanding of lateral line structure and function. The design and fabrication of an ALL sensor on the basis of various sensing principles are then presented. ALL systems are collections of sensors that include carrier and control circuit. Their structure and hydrodynamic detection are reviewed. Finally, further research trends and existing problems of ALL are discussed.

A Review of Artificial Lateral Line in Sensor Fabrication and Bionic Applications for Robot Fish

PubMed Central

Wang, Anyi; Wang, Xinbao; Liu, Peng

2016-01-01

Lateral line is a system of sense organs that can aid fishes to maneuver in a dark environment. Artificial lateral line (ALL) imitates the structure of lateral line in fishes and provides invaluable means for underwater-sensing technology and robot fish control. This paper reviews ALL, including sensor fabrication and applications to robot fish. The biophysics of lateral line are first introduced to enhance the understanding of lateral line structure and function. The design and fabrication of an ALL sensor on the basis of various sensing principles are then presented. ALL systems are collections of sensors that include carrier and control circuit. Their structure and hydrodynamic detection are reviewed. Finally, further research trends and existing problems of ALL are discussed. PMID:28115825

Novel fabrication of flexible graphene-based chemical sensors with heaters using soft lithographic patterning method.

PubMed

Jung, Min Wook; Myung, Sung; Song, Wooseok; Kang, Min-A; Kim, Sung Ho; Yang, Cheol-Soo; Lee, Sun Sook; Lim, Jongsun; Park, Chong-Yun; Lee, Jeong-O; An, Ki-Seok

2014-08-27

We have fabricated graphene-based chemical sensors with flexible heaters for the highly sensitive detection of specific gases. We believe that increasing the temperature of the graphene surface significantly enhanced the electrical signal change of the graphene-based channel, and reduced the recovery time needed to obtain a normal state of equilibrium. In addition, a simple and efficient soft lithographic patterning process was developed via surface energy modification for advanced, graphene-based flexible devices, such as gas sensors. As a proof of concept, we demonstrated the high sensitivity of NO2 gas sensors based on graphene nanosheets. These devices were fabricated using a simple soft-lithographic patterning method, where flexible graphene heaters adjacent to the channel of sensing graphene were utilized to control graphene temperature.

Design and Fabrication of Full Wheatstone-Bridge-Based Angular GMR Sensors.

PubMed

Yan, Shaohua; Cao, Zhiqiang; Guo, Zongxia; Zheng, Zhenyi; Cao, Anni; Qi, Yue; Leng, Qunwen; Zhao, Weisheng

2018-06-05

Since the discovery of the giant magnetoresistive (GMR) effect, GMR sensors have gained much attention in last decades due to their high sensitivity, small size, and low cost. The full Wheatstone-bridge-based GMR sensor is most useful in terms of the application point of view. However, its manufacturing process is usually complex. In this paper, we present an efficient and concise approach to fabricate a full Wheatstone-bridge-based angular GMR sensor by depositing one GMR film stack, utilizing simple patterned processes, and a concise post-annealing procedure based on a special layout. The angular GMR sensor is of good linear performance and achieves a sensitivity of 0.112 mV/V/Oe at the annealing temperature of 260 °C in the magnetic field range from -50 to +50 Oe. This work provides a design and method for GMR-sensor manufacturing that is easy for implementation and suitable for mass production.

Design of In Situ Poled Ce(3+)-Doped Electrospun PVDF/Graphene Composite Nanofibers for Fabrication of Nanopressure Sensor and Ultrasensitive Acoustic Nanogenerator.

PubMed

Garain, Samiran; Jana, Santanu; Sinha, Tridib Kumar; Mandal, Dipankar

2016-02-01

We report an efficient, low-cost in situ poled fabrication strategy to construct a large area, highly sensitive, flexible pressure sensor by electrospun Ce(3+) doped PVDF/graphene composite nanofibers. The entire device fabrication process is scalable and enabling to large-area integration. It can able to detect imparting pressure as low as 2 Pa with high level of sensitivity. Furthermore, Ce(3+)-doped PVDF/graphene nanofiber based ultrasensitive pressure sensors can also be used as an effective nanogenerator as it generating an output voltage of 11 V with a current density ∼6 nA/cm(2) upon repetitive application of mechanical stress that could lit up 10 blue light emitting diodes (LEDs) instantaneously. Furthermore, to use it in environmental random vibrations (such as wind flow, water fall, transportation of vehicles, etc.), nanogenerator is integrated with musical vibration that exhibits to power up three blue LEDs instantly that promises as an ultrasensitive acoustic nanogenerator (ANG). The superior sensing properties in conjunction with mechanical flexibility, integrability, and robustness of nanofibers enabled real-time monitoring of sound waves as well as detection of different type of musical vibrations. Thus, ANG promises to use as an ultrasensitive pressure sensor, mechanical energy harvester, and effective power source for portable electronic and wearable devices.

Design optimization and fabrication of a novel structural piezoresistive pressure sensor for micro-pressure measurement

NASA Astrophysics Data System (ADS)

Li, Chuang; Cordovilla, Francisco; Ocaña, José L.

2018-01-01

This paper presents a novel structural piezoresistive pressure sensor with a four-beams-bossed-membrane (FBBM) structure that consisted of four short beams and a central mass to measure micro-pressure. The proposed structure can alleviate the contradiction between sensitivity and linearity to realize the micro measurement with high accuracy. In this study, the design, fabrication and test of the sensor are involved. By utilizing the finite element analysis (FEA) to analyze the stress distribution of sensitive elements and subsequently deducing the relationships between structural dimensions and mechanical performance, the optimization process makes the sensor achieve a higher sensitivity and a lower pressure nonlinearity. Based on the deduced equations, a series of optimized FBBM structure dimensions are ultimately determined. The designed sensor is fabricated on a silicon wafer by using traditional MEMS bulk-micromachining and anodic bonding technology. Experimental results show that the sensor achieves the sensitivity of 4.65 mV/V/kPa and pressure nonlinearity of 0.25% FSS in the operating range of 0-5 kPa at room temperature, indicating that this novel structure sensor can be applied in measuring the absolute micro pressure lower than 5 kPa.

A Macroporous TiO2 Oxygen Sensor Fabricated Using Anodic Aluminium Oxide as an Etching Mask

PubMed Central

Lu, Chih-Cheng; Huang, Yong-Sheng; Huang, Jun-Wei; Chang, Chien-Kuo; Wu, Sheng-Po

2010-01-01

An innovative fabrication method to produce a macroporous Si surface by employing an anodic aluminium oxide (AAO) nanopore array layer as an etching template is presented. Combining AAO with a reactive ion etching (RIE) processes, a homogeneous and macroporous silicon surface can be effectively configured by modulating AAO process parameters and alumina film thickness, thus hopefully replacing conventional photolithography and electrochemical etch methods. The hybrid process integration is considered fully CMOS compatible thanks to the low-temperature AAO and CMOS processes. The gas-sensing characteristics of 50 nm TiO2 nanofilms deposited on the macroporous surface are compared with those of conventional plain (or non-porous) nanofilms to verify reduced response noise and improved sensitivity as a result of their macroporosity. Our experimental results reveal that macroporous geometry of the TiO2 chemoresistive gas sensor demonstrates 2-fold higher (∼33%) improved sensitivity than a non-porous sensor at different levels of oxygen exposure. In addition, the macroporous device exhibits excellent discrimination capability and significantly lessened response noise at 500 °C. Experimental results indicate that the hybrid process of such miniature and macroporous devices are compatible as well as applicable to integrated next generation bio-chemical sensors. PMID:22315561

A macroporous TiO2 oxygen sensor fabricated using anodic aluminium oxide as an etching mask.

PubMed

Lu, Chih-Cheng; Huang, Yong-Sheng; Huang, Jun-Wei; Chang, Chien-Kuo; Wu, Sheng-Po

2010-01-01

An innovative fabrication method to produce a macroporous Si surface by employing an anodic aluminium oxide (AAO) nanopore array layer as an etching template is presented. Combining AAO with a reactive ion etching (RIE) processes, a homogeneous and macroporous silicon surface can be effectively configured by modulating AAO process parameters and alumina film thickness, thus hopefully replacing conventional photolithography and electrochemical etch methods. The hybrid process integration is considered fully CMOS compatible thanks to the low-temperature AAO and CMOS processes. The gas-sensing characteristics of 50 nm TiO(2) nanofilms deposited on the macroporous surface are compared with those of conventional plain (or non-porous) nanofilms to verify reduced response noise and improved sensitivity as a result of their macroporosity. Our experimental results reveal that macroporous geometry of the TiO(2) chemoresistive gas sensor demonstrates 2-fold higher (∼33%) improved sensitivity than a non-porous sensor at different levels of oxygen exposure. In addition, the macroporous device exhibits excellent discrimination capability and significantly lessened response noise at 500 °C. Experimental results indicate that the hybrid process of such miniature and macroporous devices are compatible as well as applicable to integrated next generation bio-chemical sensors.

Design, Fabrication, Processing, and Testing of Micro-Electro-Mechanical Chemical Sensors

DTIC Science & Technology

1995-12-01

sensor ...... .......................... 118 71. Resonating bridge parameter curves ...... ......................... 119 72. Low frequency oscillations...131 82. Heater V-I curve .. .. .. .. ... ... ... ... ... ... ... ... ..... 132 83. Frequency response of heated chemoresistor...devices, including devices that may be pre-stressed due to fabrication procedures (i.e. curve out of the plane after being released)? Due to their

Fabrication and characterization of high-K dielectric integrated silicon nanowire sensor for DNA sensing application (Conference Presentation)

NASA Astrophysics Data System (ADS)

Jayakumar, Ganesh; Legallais, Maxime; Hellström, Per-Erik; Mouis, Mireille; Stambouli, Valérie; Ternon, Céline; Östling, Mikael

2016-09-01

1D silicon nanowires (SiNW) are attractive for charge based DNA sensing applications due to their small size and large surface to volume ratio. An ideal portable biosensor is expected to have repeatable and reliable sensitivity, selectivity, low production cost and small feature size. Instead of using tools such as e-beam that are capital and time intensive, we propose a low cost CMOS self-aligned-double-patterning I-line lithography process to fabricate 60 nm wide SiNW. DNA probes are grafted on a thin dielectric layer that is deposited on top of the SiNW surface. Here we used HfO2 instead of the usual SiO2. Indeed, compared to SiO2, HfO2 has been reported to have higher amount of OH groups on its surface leading to enhanced signal quality. We also report preliminary biosensor characterizations. After HfO2 functionalization and single-stranded DNA probe grafting onto the SiNWs, the sensors were first put in contact with fluorophore labelled complementary DNA targets in order to test the efficiency of DNA hybridization optically. Then, a sequence of hybridization, de-hybridization and re-hybridization steps was followed by Id-Vg measurements in order to measure the electrical response of the sensors to target DNA as well as recycling capability. After each step, SiNW devices exhibited a threshold voltage shift larger than device-to-device dispersion, showing that both complementary DNA hybridization and de-hybridization can be electrically detected. These results are very encouraging as they open new frontiers for heterogeneous integration of liquid interacting array of nano sensors with CMOS circuits to fabricate a complete lab on chip.

Fabrication and Evaluation of a Micro(Bio)Sensor Array Chip for Multiple Parallel Measurements of Important Cell Biomarkers

PubMed Central

Pemberton, Roy M.; Cox, Timothy; Tuffin, Rachel; Drago, Guido A.; Griffiths, John; Pittson, Robin; Johnson, Graham; Xu, Jinsheng; Sage, Ian C.; Davies, Rhodri; Jackson, Simon K.; Kenna, Gerry; Luxton, Richard; Hart, John P.

2014-01-01

This report describes the design and development of an integrated electrochemical cell culture monitoring system, based on enzyme-biosensors and chemical sensors, for monitoring indicators of mammalian cell metabolic status. MEMS technology was used to fabricate a microwell-format silicon platform including a thermometer, onto which chemical sensors (pH, O2) and screen-printed biosensors (glucose, lactate), were grafted/deposited. Microwells were formed over the fabricated sensors to give 5-well sensor strips which were interfaced with a multipotentiostat via a bespoke connector box interface. The operation of each sensor/biosensor type was examined individually, and examples of operating devices in five microwells in parallel, in either potentiometric (pH sensing) or amperometric (glucose biosensing) mode are shown. The performance characteristics of the sensors/biosensors indicate that the system could readily be applied to cell culture/toxicity studies. PMID:25360580

Synthesis and Characterization of CuO Nanodisks for High-Sensitive and Selective Ethanol Gas Sensor Applications.

PubMed

Umar, Ahmad; Lee, Jong-Heun; Kumar, Rajesh; Al-Dossary, O

2017-02-01

Herein, the fabrication and characterization of highly sensitive and selective ethanol gas sensor based on CuO nanodisks is reported. The CuO nanodisks were synthesized by facile hydrothermal process and detailed characterization revealed the well-crystallinity, high-purity and high density growth of the prepared material. To fabricate the ethanol gas sensor, the prepared nanodisks were coated on alumina substrate. The fabricated sensor exhibited high-sensitivity and the recorded gas response (resistance-ratio), response time (τ res) and recovery time (τ recov) were 6.2, 119 and 35 s, respectively for 100 ppm of C₂H₅OH at 300 °C. Further, the fabricated sensor shows high selectivity towards ethanol gas compared to H₂ and CO gases.

Microfabricated Air-Microfluidic Sensor for Personal Monitoring of Airborne Particulate Matter: Design, Fabrication, and Experimental Results

EPA Science Inventory

We present the design and fabrication of a micro electro mechanical systems (MEMS) air-microfluidic particulate matter (PM) sensor, and show experimental results obtained from exposing the sensor to concentrations of tobacco smoke and diesel exhaust, two commonly occurring P...

Sheath-Core Graphite/Silk Fiber Made by Dry-Meyer-Rod-Coating for Wearable Strain Sensors.

PubMed

Zhang, Mingchao; Wang, Chunya; Wang, Qi; Jian, Muqiang; Zhang, Yingying

2016-08-17

Recent years have witnessed the explosive development of flexible strain sensors. Nanomaterials have been widely utilized to fabricate flexible strain sensors, because of their high flexibility and electrical conductivity. However, the fabrication processes for nanomaterials and the subsequent strain sensors are generally complicated and are manufactured at high cost. In this work, we developed a facile dry-Meyer-rod-coating process to fabricate sheath-core-structured single-fiber strain sensors using ultrafine graphite flakes as the sheath and silk fibers as the core by virtue of their flexibility, high production, and low cost. The fabricated strain sensor exhibits a high sensitivity with a gauge factor of 14.5 within wide workable strain range up to 15%, and outstanding stability (up to 3000 cycles). The single-fiber-based strain sensors could be attached to a human body to detect joint motions or easily integrated into the multidirectional strain sensor for monitoring multiaxial strain, showing great potential applications as wearable strain sensors.

Fabric-based Pressure Sensor Array for Decubitus Ulcer Monitoring

PubMed Central

Chung, Philip; Rowe, Allison; Etemadi, Mozziyar; Lee, Hanmin; Roy, Shuvo

2015-01-01

Decubitus ulcers occur in an estimated 2.5 million Americans each year at an annual cost of $11 billion to the U.S. health system. Current screening and prevention techniques for assessing risk for decubitus ulcer formation and repositioning patients every 1–2 hours are labor-intensive and can be subjective. We propose use of a Bluetooth-enabled fabric-based pressure sensor array as a simple tool to objectively assess and continuously monitor decubitus ulcer risk. PMID:24111232

Easy-to-Fabricate and High-Sensitivity LSPR Type Specific Protein Detection Sensor Using AAO Nano-Pore Size Control

PubMed Central

Kim, Sae-Wan; Lee, Jae-Sung; Lee, Sang-Won; Kang, Byoung-Ho; Kwon, Jin-Beom; Kim, Ok-Sik; Kim, Ju-Seong; Kim, Eung-Soo; Kwon, Dae-Hyuk; Kang, Shin-Won

2017-01-01

In this study, we developed a pore size/pore area-controlled optical biosensor-based anodic aluminum oxide (AAO) nanostructure. As the pore size of AAO increases, the unit cell of AAO increases, which also increases the non-pore area to which the antibody binds. The increase in the number of antibodies immobilized on the surface of the AAO enables effective detection of trace amounts of antigen, because increased antigen-antibody bonding results in a larger surface refractive index change. High sensitivity was thus achieved through amplification of the interference wave of two vertically-incident reflected waves through the localized surface plasmon resonance phenomenon. The sensitivity of the fabricated sensor was evaluated by measuring the change in wavelength with the change in the refractive index of the device surface, and sensitivity was increased with increasing pore-size and non-pore area. The sensitivity of the fabricated sensor was improved and up to 11.8 ag/mL serum amyloid A1 antigen was detected. In addition, the selectivity of the fabricated sensor was confirmed through a reaction with a heterogeneous substance, C-reactive protein antigen. By using hard anodization during fabrication of the AAO, the fabrication time of the device was reduced and the AAO chip was fabricated quickly and easily. PMID:28406469

Scalable Low-Cost Fabrication of Disposable Paper Sensors for DNA Detection

PubMed Central

2015-01-01

Controlled integration of features that enhance the analytical performance of a sensor chip is a challenging task in the development of paper sensors. A critical issue in the fabrication of low-cost biosensor chips is the activation of the device surface in a reliable and controllable manner compatible with large-scale production. Here, we report stable, well-adherent, and repeatable site-selective deposition of bioreactive amine functionalities and biorepellant polyethylene glycol-like (PEG) functionalities on paper sensors by aerosol-assisted, atmospheric-pressure, plasma-enhanced chemical vapor deposition. This approach requires only 20 s of deposition time, compared to previous reports on cellulose functionalization, which takes hours. A detailed analysis of the near-edge X-ray absorption fine structure (NEXAFS) and its sensitivity to the local electronic structure of the carbon and nitrogen functionalities. σ*, π*, and Rydberg transitions in C and N K-edges are presented. Application of the plasma-processed paper sensors in DNA detection is also demonstrated. PMID:25423585

Scalable Low-Cost Fabrication of Disposable Paper Sensors for DNA Detection

DOE PAGES

Gandhiraman, Ram P.; Nordlund, Dennis; Jayan, Vivek; ...

2014-11-25

Controlled integration of features that enhance the analytical performance of a sensor chip is a challenging task in the development of paper sensors. A critical issue in the fabrication of low-cost biosensor chips is the activation of the device surface in a reliable and controllable manner compatible with large-scale production. Here, we report stable, well-adherent, and repeatable site-selective deposition of bioreactive amine functionalities and biorepellant polyethylene glycol-like (PEG) functionalities on paper sensors by aerosol-assisted, atmospheric-pressure, plasma-enhanced chemical vapor deposition. This approach requires only 20 s of deposition time, compared to previous reports on cellulose functionalization, which takes hours. We presentmore » a detailed analysis of the near-edge X-ray absorption fine structure (NEXAFS) and its sensitivity to the local electronic structure of the carbon and nitrogen functionalities. σ*, π*, and Rydberg transitions in C and N K-edges. Lastly, application of the plasma-processed paper sensors in DNA detection is also demonstrated.« less

Design Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy

PubMed Central

Li, Chuang; Cordovilla, Francisco; Jagdheesh, R.

2018-01-01

This paper presents a novel structural piezoresistive pressure sensor with four-grooved membrane combined with rood beam to measure low pressure. In this investigation, the design, optimization, fabrication, and measurements of the sensor are involved. By analyzing the stress distribution and deflection of sensitive elements using finite element method, a novel structure featuring high concentrated stress profile (HCSP) and locally stiffened membrane (LSM) is built. Curve fittings of the mechanical stress and deflection based on FEM simulation results are performed to establish the relationship between mechanical performance and structure dimension. A combination of FEM and curve fitting method is carried out to determine the structural dimensions. The optimized sensor chip is fabricated on a SOI wafer by traditional MEMS bulk-micromachining and anodic bonding technology. When the applied pressure is 1 psi, the sensor achieves a sensitivity of 30.9 mV/V/psi, a pressure nonlinearity of 0.21% FSS and an accuracy of 0.30%, and thereby the contradiction between sensitivity and linearity is alleviated. In terms of size, accuracy and high temperature characteristic, the proposed sensor is a proper choice for measuring pressure of less than 1 psi. PMID:29393916

Development of novel acoustic wave biosensor platforms based on magnetostriction and fabrication of magnetostrictive nanowires

NASA Astrophysics Data System (ADS)

Li, Suiqiong

There is an urgent need for biosensors that are able to detect and quantify the presence of a small amount of biological threat agents in a real-time manner. Acoustic wave (AW) devices, whose performance is defined by mass sensitivity (Sm) and merit quality factor (Q value), have been extensively studied as high performance biosensor platforms. However, current AW devices face some challenges in practical applications. In this research, two types of AW devices---magnetostrictive microcantilever (MSMC) and completely free-standing magnetostrictive particle (MSP)---were developed. The research consists of two parts: (1) Design and the feasibility study of MSMC and MSP based sensor technology; (2) Fabrication and characterization of micro/nano MSPs made of amorphous Fe-B alloy. Both MSMC and MSP based sensors are wireless/remote and work well in liquid, which makes the sensors good candidates for in-situ detection. The performance of MSMC was simulated and compared with the state of art AW devices: microcantilevers. The MSMC exhibits the following advantages: (1) remote/wireless driving and sensing; (2) ease of fabrication; (3) works well in liquid; (4) exhibits a high Q value (> 500 in air); (5) well suited for sensor array development. MSMCs in milli/micro sizes were fabricated and their performance was characterized in air and liquid. The experimental results confirm the advantages of MSMC mentioned above. The in situ detection of the yeast cells and Bacillus anthracis spores in water were performed using MSMC biosensors. MSPs in the shape of strip and bar were investigated. Strip-shape MSPs in milli/micro sizes were fabricated. The resonance behaviors of MSPs at the even and odd vibration modes were analyzed. MSP exhibits a Sm about 100 times greater, and a Q value about 10 times greater, than MCs. A multiple-sensor and a multiple-target approach were developed to further enhance the performance of MSP-based sensors. A unique methodology was created to detect the

Strain monitoring of bismaleimide composites using embedded microcavity sensor

NASA Astrophysics Data System (ADS)

Kaur, Amardeep; Anandan, Sudharshan; Yuan, Lei; Watkins, Steve E.; Chandrashekhara, K.; Xiao, Hai; Phan, Nam

2016-03-01

A type of extrinsic Fabry-Perot interferometer (EFPI) fiber optic sensor, i.e., the microcavity strain sensor, is demonstrated for embedded, high-temperature applications. The sensor is fabricated using a femtosecond (fs) laser. The fs-laser-based fabrication makes the sensor thermally stable to sustain operating temperatures as high as 800°C. The sensor has low sensitivity toward the temperature as compared to its response toward the applied strain. The performance of the EFPI sensor is tested in an embedded application. The host material is carbon fiber/bismaleimide (BMI) composite laminate that offer thermally stable characteristics at high ambient temperatures. The sensor exhibits highly linear response toward the temperature and strain. Analytical work done with embedded optical-fiber sensors using the out-of-autoclave BMI laminate was limited until now. The work presented in this paper offers an insight into the strain and temperature interactions of the embedded sensors with the BMI composites.

Chemical sensors fabricated by a photonic integrated circuit foundry

NASA Astrophysics Data System (ADS)

Stievater, Todd H.; Koo, Kee; Tyndall, Nathan F.; Holmstrom, Scott A.; Kozak, Dmitry A.; Goetz, Peter G.; McGill, R. Andrew; Pruessner, Marcel W.

2018-02-01

We describe the detection of trace concentrations of chemical agents using waveguide-enhanced Raman spectroscopy in a photonic integrated circuit fabricated by AIM Photonics. The photonic integrated circuit is based on a five-centimeter long silicon nitride waveguide with a trench etched in the top cladding to allow access to the evanescent field of the propagating mode by analyte molecules. This waveguide transducer is coated with a sorbent polymer to enhance detection sensitivity and placed between low-loss edge couplers. The photonic integrated circuit is laid-out using the AIM Photonics Process Design Kit and fabricated on a Multi-Project Wafer. We detect chemical warfare agent simulants at sub parts-per-million levels in times of less than a minute. We also discuss anticipated improvements in the level of integration for photonic chemical sensors, as well as existing challenges.

Ionic pH and glucose sensors fabricated using hydrothermal ZnO nanostructures

NASA Astrophysics Data System (ADS)

Wang, Jyh-Liang; Yang, Po-Yu; Hsieh, Tsang-Yen; Juan, Pi-Chun

2016-01-01

Hydrothermally synthesized aluminum-doped ZnO (AZO) nanostructures have been adopted in extended-gate field-effect transistor (EGFET) sensors to demonstrate the sensitive and stable pH and glucose sensing characteristics of AZO-nanostructured EGFET sensors. The AZO-nanostructured EGFET sensors exhibited the following superior pH sensing characteristics: a high current sensitivity of 0.96 µA1/2/pH, a high linearity of 0.9999, less distortion of output waveforms, a small hysteresis width of 4.83 mV, good long-term repeatability, and a wide sensing range from pHs 1 to 13. The glucose sensing characteristics of AZO-nanostructured biosensors exhibited the desired sensitivity of 60.5 µA·cm-2·mM-1 and a linearity of 0.9996 up to 13.9 mM. The attractive characteristics of high sensitivity, high linearity, and repeatability of using ionic AZO-nanostructured EGFET sensors indicate their potential use as electrochemical and disposable biosensors.

Reliable before-fabrication forecasting of normal and touch mode MEMS capacitive pressure sensor: modeling and simulation

NASA Astrophysics Data System (ADS)

Jindal, Sumit Kumar; Mahajan, Ankush; Raghuwanshi, Sanjeev Kumar

2017-10-01

An analytical model and numerical simulation for the performance of MEMS capacitive pressure sensors in both normal and touch modes is required for expected behavior of the sensor prior to their fabrication. Obtaining such information should be based on a complete analysis of performance parameters such as deflection of diaphragm, change of capacitance when the diaphragm deflects, and sensitivity of the sensor. In the literature, limited work has been carried out on the above-stated issue; moreover, due to approximation factors of polynomials, a tolerance error cannot be overseen. Reliable before-fabrication forecasting requires exact mathematical calculation of the parameters involved. A second-order polynomial equation is calculated mathematically for key performance parameters of both modes. This eliminates the approximation factor, and an exact result can be studied, maintaining high accuracy. The elimination of approximation factors and an approach of exact results are based on a new design parameter (δ) that we propose. The design parameter gives an initial hint to the designers on how the sensor will behave once it is fabricated. The complete work is aided by extensive mathematical detailing of all the parameters involved. Next, we verified our claims using MATLAB® simulation. Since MATLAB® effectively provides the simulation theory for the design approach, more complicated finite element method is not used.

Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technology

PubMed Central

Chen, Jiawen; Li, Jianhua; Li, Yiyuan; Chen, Yulong

2018-01-01

A miniaturized Co-based amorphous wire GMI (Giant magneto-impedance) magnetic sensor was designed and fabricated in this paper. The Co-based amorphous wire was used as the sense element due to its high sensitivity to the magnetic field. A three-dimensional micro coil surrounding the Co-based amorphous wire was fabricated by MEMS (Micro-Electro-Mechanical System) technology, which was used to extract the electrical signal. The three-dimensional micro pick-up coil was designed and simulated with HFSS (High Frequency Structure Simulator) software to determine the key parameters. Surface micro machining MEMS (Micro-Electro-Mechanical System) technology was employed to fabricate the three-dimensional coil. The size of the developed amorphous wire magnetic sensor is 5.6 × 1.5 × 1.1 mm3. Helmholtz coil was used to characterize the performance of the device. The test results of the sensor sample show that the voltage change is 130 mV/Oe and the linearity error is 4.83% in the range of 0~45,000 nT. The results indicate that the developed miniaturized magnetic sensor has high sensitivity. By testing the electrical resistance of the samples, the results also showed high uniformity of each device. PMID:29494477

Simple fabrication process for 2D ZnO nanowalls and their potential application as a methane sensor.

PubMed

Chen, Tse-Pu; Chang, Sheng-Po; Hung, Fei-Yi; Chang, Shoou-Jinn; Hu, Zhan-Shuo; Chen, Kuan-Jen

2013-03-20

Two-dimensional (2D) ZnO nanowalls were prepared on a glass substrate by a low-temperature thermal evaporation method, in which the fabrication process did not use a metal catalyst or the pre-deposition of a ZnO seed layer on the substrate. The nanowalls were characterized for their surface morphology, and the structural and optical properties were investigated using scanning electron microscopy (SEM), X-ray diffraction (XRD), transmission electron microscopy (TEM), and photoluminescence (PL). The fabricated ZnO nanowalls have many advantages, such as low growth temperature and good crystal quality, while being fast, low cost, and easy to fabricate. Methane sensor measurements of the ZnO nanowalls show a high sensitivity to methane gas, and rapid response and recovery times. These unique characteristics are attributed to the high surface-to-volume ratio of the ZnO nanowalls. Thus, the ZnO nanowall methane sensor is a potential gas sensor candidate owing to its good performance.

Simple Fabrication Process for 2D ZnO Nanowalls and Their Potential Application as a Methane Sensor

PubMed Central

Chen, Tse-Pu; Chang, Sheng-Po; Hung, Fei-Yi; Chang, Shoou-Jinn; Hu, Zhan-Shuo; Chen, Kuan-Jen

2013-01-01

Two-dimensional (2D) ZnO nanowalls were prepared on a glass substrate by a low-temperature thermal evaporation method, in which the fabrication process did not use a metal catalyst or the pre-deposition of a ZnO seed layer on the substrate. The nanowalls were characterized for their surface morphology, and the structural and optical properties were investigated using scanning electron microscopy (SEM), X-ray diffraction (XRD), transmission electron microscopy (TEM), and photoluminescence (PL). The fabricated ZnO nanowalls have many advantages, such as low growth temperature and good crystal quality, while being fast, low cost, and easy to fabricate. Methane sensor measurements of the ZnO nanowalls show a high sensitivity to methane gas, and rapid response and recovery times. These unique characteristics are attributed to the high surface-to-volume ratio of the ZnO nanowalls. Thus, the ZnO nanowall methane sensor is a potential gas sensor candidate owing to its good performance. PMID:23519350

Fabrication Quality Analysis of a Fiber Optic Refractive Index Sensor Created by CO2 Laser Machining

PubMed Central

Chen, Chien-Hsing; Yeh, Bo-Kuan; Tang, Jaw-Luen; Wu, Wei-Te

2013-01-01

This study investigates the CO2 laser-stripped partial cladding of silica-based optic fibers with a core diameter of 400 μm, which enables them to sense the refractive index of the surrounding environment. However, inappropriate treatments during the machining process can generate a number of defects in the optic fiber sensors. Therefore, the quality of optic fiber sensors fabricated using CO2 laser machining must be analyzed. The results show that analysis of the fiber core size after machining can provide preliminary defect detection, and qualitative analysis of the optical transmission defects can be used to identify imperfections that are difficult to observe through size analysis. To more precisely and quantitatively detect fabrication defects, we included a tensile test and numerical aperture measurements in this study. After a series of quality inspections, we proposed improvements to the existing CO2 laser machining parameters, namely, a vertical scanning pathway, 4 W of power, and a feed rate of 9.45 cm/s. Using these improved parameters, we created optical fiber sensors with a core diameter of approximately 400 μm, no obvious optical transmission defects, a numerical aperture of 0.52 ± 0.019, a 0.886 Weibull modulus, and a 1.186 Weibull-shaped parameter. Finally, we used the optical fiber sensor fabricated using the improved parameters to measure the refractive indices of various solutions. The results show that a refractive-index resolution of 1.8 × 10−4 RIU (linear fitting R2 = 0.954) was achieved for sucrose solutions with refractive indices ranging between 1.333 and 1.383. We also adopted the particle plasmon resonance sensing scheme using the fabricated optical fibers. The results provided additional information, specifically, a superior sensor resolution of 5.73 × 10−5 RIU, and greater linearity at R2 = 0.999. PMID:23535636

A Novel Method for Fabricating Wearable, Piezoresistive, and Pressure Sensors Based on Modified-Graphite/Polyurethane Composite Films

PubMed Central

He, Yin; Li, Wei; Yang, Guilin; Liu, Hao; Lu, Junyu; Zheng, Tongtong; Li, Xiaojiu

2017-01-01

A wearable, low-cost, highly repeatable piezoresistive sensor was fabricated by the synthesis of modified-graphite and polyurethane (PU) composites and polydimethylsiloxane (PDMS). Graphite sheets functionalized by using a silane coupling agent (KH550) were distributed in PU/N,N-dimethylformamide (DMF) solution, which were then molded to modified-graphite/PU (MG/PU) composite films. Experimental results show that with increasing modified-graphite content, the tensile strength of the MG/PU films first increased and then decreased, and the elongation at break of the composite films showed a decreasing trend. The electrical conductivity of the composite films can be influenced by filler modification and concentration, and the percolation threshold of MG/PU was 28.03 wt %. Under liner uniaxial compression, the 30 wt % MG/PU composite films exhibited 0.274 kPa−1 piezoresistive sensitivity within the range of low pressure, and possessed better stability and hysteresis. The flexible MG/PU composite piezoresistive sensors have great potential for body motion, wearable devices for human healthcare, and garment pressure testing. PMID:28773047

Simple and Fast Method for Fabrication of Endoscopic Implantable Sensor Arrays

PubMed Central

Tahirbegi, I. Bogachan; Alvira, Margarita; Mir, Mònica; Samitier, Josep

2014-01-01

Here we have developed a simple method for the fabrication of disposable implantable all-solid-state ion-selective electrodes (ISE) in an array format without using complex fabrication equipment or clean room facilities. The electrodes were designed in a needle shape instead of planar electrodes for a full contact with the tissue. The needle-shape platform comprises 12 metallic pins which were functionalized with conductive inks and ISE membranes. The modified microelectrodes were characterized with cyclic voltammetry, scanning electron microscope (SEM), and optical interferometry. The surface area and roughness factor of each microelectrode were determined and reproducible values were obtained for all the microelectrodes on the array. In this work, the microelectrodes were modified with membranes for the detection of pH and nitrate ions to prove the reliability of the fabricated sensor array platform adapted to an endoscope. PMID:24971473

Simple and fast method for fabrication of endoscopic implantable sensor arrays.

PubMed

Tahirbegi, I Bogachan; Alvira, Margarita; Mir, Mònica; Samitier, Josep

2014-06-26

Here we have developed a simple method for the fabrication of disposable implantable all-solid-state ion-selective electrodes (ISE) in an array format without using complex fabrication equipment or clean room facilities. The electrodes were designed in a needle shape instead of planar electrodes for a full contact with the tissue. The needle-shape platform comprises 12 metallic pins which were functionalized with conductive inks and ISE membranes. The modified microelectrodes were characterized with cyclic voltammetry, scanning electron microscope (SEM), and optical interferometry. The surface area and roughness factor of each microelectrode were determined and reproducible values were obtained for all the microelectrodes on the array. In this work, the microelectrodes were modified with membranes for the detection of pH and nitrate ions to prove the reliability of the fabricated sensor array platform adapted to an endoscope.

Design, fabrication, and characterization of Fresnel lens array with spatial filtering for passive infrared motion sensors

NASA Astrophysics Data System (ADS)

Cirino, Giuseppe A.; Barcellos, Robson; Morato, Spero P.; Bereczki, Allan; Neto, Luiz G.

2006-09-01

A cubic-phase distribution is applied in the design, fabrication and characterization of inexpensive Fresnel lens arrays for passive infrared motion sensors. The resulting lens array produces a point spread function (PSF) capable of distinguish the presence of humans from pets by the employment of the so-called wavefront coding method. The cubic phase distribution used in the design can also reduce the optical aberrations present in the system. This aberration control allows a high tolerance in the fabrication of the lenses and in the alignment errors of the sensor. In order to proof the principle, a lens was manufactured on amorphous hydrogenated carbon thin film, by well-known micro fabrication process steps. The optical results demonstrates that the optical power falling onto the detector surface is attenuated for targets that present a mass that is horizontally distributed in space (e.g. pets) while the optical power is enhanced for targets that present a mass vertically distributed in space (e.g. humans). Then a mould on steel was fabricated by laser engraving, allowing large-scale production of the lens array in polymeric material. A polymeric lens was injected and its optical transmittance was characterized by Fourier Transform Infrared Spectrometry technique, which has shown an adequate optical transmittance in the 8-14 μm wavelength range. Finally the performance of the sensor was measured in a climate-controlled test laboratory constructed for this purpose. The results show that the sensor operates normally with a human target, with a 12 meter detection zone and within an angle of 100 degrees. On the other hand, when a small pet runs through a total of 22 different trajectories no sensor trips are observed. The novelty of this work is the fact that the so-called pet immunity function was implemented in a purely optical filtering. As a result, this approach allows the reduction of some hardware parts as well as decreasing the software complexity, once the

Inkjet-Printed Graphene/PEDOT:PSS Temperature Sensors on a Skin-Conformable Polyurethane Substrate.

PubMed

Vuorinen, Tiina; Niittynen, Juha; Kankkunen, Timo; Kraft, Thomas M; Mäntysalo, Matti

2016-10-18

Epidermal electronic systems (EESs) are skin-like electronic systems, which can be used to measure several physiological parameters from the skin. This paper presents materials and a simple, straightforward fabrication process for skin-conformable inkjet-printed temperature sensors. Epidermal temperature sensors are already presented in some studies, but they are mainly fabricated using traditional photolithography processes. These traditional fabrication routes have several processing steps and they create a substantial amount of material waste. Hence utilizing printing processes, the EES may become attractive for disposable systems by decreasing the manufacturing costs and reducing the wasted materials. In this study, the sensors are fabricated with inkjet-printed graphene/PEDOT:PSS ink and the printing is done on top of a skin-conformable polyurethane plaster (adhesive bandage). Sensor characterization was conducted both in inert and ambient atmosphere and the graphene/PEDOT:PSS temperature sensors (thermistors) were able reach higher than 0.06% per degree Celsius sensitivity in an optimal environment exhibiting negative temperature dependence.

Fabrication of micromachined ceramic thin-film-type pressure sensors for overpressure tolerance and its characteristics

NASA Astrophysics Data System (ADS)

Chung, Gwiy-Sang; Kim, Jae-Min

2004-04-01

This paper describes the fabrication process and characteristics of ceramic thin-film pressure sensors based on Ta-N strain gauges for harsh environment applications. The Ta-N thin-film strain gauges are sputter-deposited on a thermally oxidized micromachined Si diaphragm with buried cavities for overpressure tolerance. The proposed device takes advantage of the good mechanical properties of single-crystalline Si as a diaphragm fabricated by SDB and electrochemical etch-stop technology, and in order to extend the temperature range, it has relatively higher resistance, stability and gauge factor of Ta-N thin-films more than other gauges. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low nonlinearity and excellent temperature stability. The sensitivity is 1.21-1.097 mV/V×kgf/cm2 in temperature ranges of 25-200°C and a maximum non-linearity is 0.43 %FS.

Development, Fabrication, and Characterization of Hydrogel Based Piezoresistive Pressure Sensors with Perforated Diaphragms

PubMed Central

Orthner, M.P.; Buetefisch, Sebastian; Magda, J.; Rieth, L.W.; Solzbacher, F.

2010-01-01

Hydrogels have been demonstrated to swell in response to a number of external stimuli including pH, CO2, glucose, and ionic strength making them useful for detection of metabolic analytes. To measure hydrogel swelling pressure, we have fabricated and tested novel perforated diaphragm piezoresistive pressure sensor arrays that couple the pressure sensing diaphragm with a perforated semi-permeable membrane. The 2×2 arrays measure approximately 3 × 5 mm2 and consist of four square sensing diaphragms with widths of 1.0, 1.25, and 1.5 mm used to measure full scale pressures of 50, 25, and 5 kPa, respectively. An optimized geometry of micro pores was etched in silicon diaphragm to allow analyte diffusion into the sensor cavity where the hydrogel material is located. The 14-step front side wafer process was carried out by a commercial foundry service (MSF, Frankfurt (Oder), Germany) and diaphragm pores were created using combination of potassium hydroxide (KOH) etching and deep reactive ion etching (DRIE). Sensor characterization was performed (without the use of hydrogels) using a custom bulge testing apparatus that simultaneously measured deflection, pressure, and electrical output. Test results are used to quantify the sensor sensitivity and demonstrate proof-of-concept. Simulations showed that the sensitivity was slightly improved for the perforated diaphragm designs while empirical electrical characterization showed that the perforated diaphragm sensors were slightly less sensitive than solid diaphragm sensors. This discrepancy is believed to be due to the influence of compressive stress found within passivation layers and poor etching uniformity. The new perforated diaphragm sensors were fully functional with sensitivities ranging from 23 to 252 μV/V-kPa (FSO= 5 to 80mV), and show a higher nonlinearity at elevated pressures than identical sensors with solid diaphragms. Sensors (1.5×1.5 mm2) with perforated diaphragms (pores=40 μm) have a nonlinearity of

Miniature piezoresistive solid state integrated pressure sensors

NASA Technical Reports Server (NTRS)

Kahng, S. K.

1980-01-01

The characteristics of silicon pressure sensors with an ultra-small diaphragm are described. The pressure sensors utilize rectangular diaphragm as small as 0.0127 x 0.0254 cm and a p-type Wheatstone bridge consisting of diffused piezoresistive elements, 0.000254 cm by 0.00254 cm. These sensors exhibit as high as 0.5 MHz natural frequency and 1 mV/V/psi pressure sensitivity. Fabrication techniques and high frequency results from shock tube testing and low frequency comparison with microphones are presented.

Highly stretchable and wearable graphene strain sensors with controllable sensitivity for human motion monitoring.

PubMed

Park, Jung Jin; Hyun, Woo Jin; Mun, Sung Cik; Park, Yong Tae; Park, O Ok

2015-03-25

Because of their outstanding electrical and mechanical properties, graphene strain sensors have attracted extensive attention for electronic applications in virtual reality, robotics, medical diagnostics, and healthcare. Although several strain sensors based on graphene have been reported, the stretchability and sensitivity of these sensors remain limited, and also there is a pressing need to develop a practical fabrication process. This paper reports the fabrication and characterization of new types of graphene strain sensors based on stretchable yarns. Highly stretchable, sensitive, and wearable sensors are realized by a layer-by-layer assembly method that is simple, low-cost, scalable, and solution-processable. Because of the yarn structures, these sensors exhibit high stretchability (up to 150%) and versatility, and can detect both large- and small-scale human motions. For this study, wearable electronics are fabricated with implanted sensors that can monitor diverse human motions, including joint movement, phonation, swallowing, and breathing.

A fabric wrist patch sensor for continuous and comprehensive monitoring of the cardiovascular system.

PubMed

Kwonjoon Lee; Kiseok Song; Taehwan Roh; Hoi-Jun Yoo

2016-08-01

The wrist patch-type ECG/APW sensor system is proposed for continuous and comprehensive monitoring of the patient's cardiovascular system. The wrist patch-type ECG/APW sensor system is consists of ECG/APW sensor, ECG/APW electrodes, and base station for real-time monitoring of the patient's status. The ECG/APW sensor and electrodes are composed of wrist patch, bandage-type ECG electrode and fabric APW electrode, respectively so that the patient's cardiovascular system can be continuously monitored in daily life with free hand-movement. Since the proposed wrist patchtype ECG/APW sensor simultaneously measures ECG/APW, the cardiac indicators, such as HR and PAT, can be extracted for comprehensive and accurate monitoring of the patient's cardiovascular system. The proposed wrist patch-type ECG/APW sensor system is successfully verified using the commercial PPG sensor (RP520) and demonstrated with the customized Android application on the smart phone.

A CMOS Humidity Sensor for Passive RFID Sensing Applications

PubMed Central

Deng, Fangming; He, Yigang; Zhang, Chaolong; Feng, Wei

2014-01-01

This paper presents a low-cost low-power CMOS humidity sensor for passive RFID sensing applications. The humidity sensing element is implemented in standard CMOS technology without any further post-processing, which results in low fabrication costs. The interface of this humidity sensor employs a PLL-based architecture transferring sensor signal processing from the voltage domain to the frequency domain. Therefore this architecture allows the use of a fully digital circuit, which can operate on ultra-low supply voltage and thus achieves low-power consumption. The proposed humidity sensor has been fabricated in the TSMC 0.18 μm CMOS process. The measurements show this humidity sensor exhibits excellent linearity and stability within the relative humidity range. The sensor interface circuit consumes only 1.05 μW at 0.5 V supply voltage and reduces it at least by an order of magnitude compared to previous designs. PMID:24841250

A CMOS humidity sensor for passive RFID sensing applications.

PubMed

Deng, Fangming; He, Yigang; Zhang, Chaolong; Feng, Wei

2014-05-16

This paper presents a low-cost low-power CMOS humidity sensor for passive RFID sensing applications. The humidity sensing element is implemented in standard CMOS technology without any further post-processing, which results in low fabrication costs. The interface of this humidity sensor employs a PLL-based architecture transferring sensor signal processing from the voltage domain to the frequency domain. Therefore this architecture allows the use of a fully digital circuit, which can operate on ultra-low supply voltage and thus achieves low-power consumption. The proposed humidity sensor has been fabricated in the TSMC 0.18 μm CMOS process. The measurements show this humidity sensor exhibits excellent linearity and stability within the relative humidity range. The sensor interface circuit consumes only 1.05 µW at 0.5 V supply voltage and reduces it at least by an order of magnitude compared to previous designs.

Microfabricated Multianalyte Sensor Arrays for Metabolic Monitoring

DTIC Science & Technology

2006-09-01

aqueous in vivo-like surrounding15-18 to entrap both the redox polymer and glucose oxidase on polyimide sheets. We have used biocompatible PEG-DA hydrogel...arrays were fabricated on gold electrodes on flexible polyimide sheets by cross-linking glucose oxidase and redox polymer using UV-initiated free...cyclic voltammetry. We have fabricated an array of glucose sensors on flexible polyimide sheets that exhibit the desired linear response in the

A spectral profile multiplexed FBG sensor network with application to strain measurement in a Kevlar woven fabric

NASA Astrophysics Data System (ADS)

Guo, Guodong; Hackney, Drew; Pankow, Mark; Peters, Kara

2017-04-01

A spectral profile division multiplexed fiber Bragg grating (FBG) sensor network is described in this paper. The unique spectral profile of each sensor in the network is identified as a distinct feature to be interrogated. Spectrum overlap is allowed under working conditions. Thus, a specific wavelength window does not need to be allocated to each sensor as in a wavelength division multiplexed (WDM) network. When the sensors are serially connected in the network, the spectrum output is expressed through a truncated series. To track the wavelength shift of each sensor, the identification problem is transformed to a nonlinear optimization problem, which is then solved by a modified dynamic multi-swarm particle swarm optimizer (DMS-PSO). To demonstrate the application of the developed network, a network consisting of four FBGs was integrated into a Kevlar woven fabric, which was under a quasi-static load imposed by an impactor head. Due to the substantial radial strain in the fabric, the spectrums of different FBGs were found to overlap during the loading process. With the developed interrogating method, the overlapped spectrum would be distinguished thus the wavelength shift of each sensor can be monitored.

EIT-Based Fabric Pressure Sensing

PubMed Central

Yao, A.; Yang, C. L.; Seo, J. K.; Soleimani, M.

2013-01-01

This paper presents EIT-based fabric sensors that aim to provide a pressure mapping using the current carrying and voltage sensing electrodes attached to the boundary of the fabric patch. Pressure-induced shape change over the sensor area makes a change in the conductivity distribution which can be conveyed to the change of boundary current-voltage data. This boundary data is obtained through electrode measurements in EIT system. The corresponding inverse problem is to reconstruct the pressure and deformation map from the relationship between the applied current and the measured voltage on the fabric boundary. Taking advantage of EIT in providing dynamical images of conductivity changes due to pressure induced shape change, the pressure map can be estimated. In this paper, the EIT-based fabric sensor was presented for circular and rectangular sensor geometry. A stretch sensitive fabric was used in circular sensor with 16 electrodes and a pressure sensitive fabric was used in a rectangular sensor with 32 electrodes. A preliminary human test was carried out with the rectangular sensor for foot pressure mapping showing promising results. PMID:23533538

EIT-based fabric pressure sensing.

PubMed

Yao, A; Yang, C L; Seo, J K; Soleimani, M

2013-01-01

This paper presents EIT-based fabric sensors that aim to provide a pressure mapping using the current carrying and voltage sensing electrodes attached to the boundary of the fabric patch. Pressure-induced shape change over the sensor area makes a change in the conductivity distribution which can be conveyed to the change of boundary current-voltage data. This boundary data is obtained through electrode measurements in EIT system. The corresponding inverse problem is to reconstruct the pressure and deformation map from the relationship between the applied current and the measured voltage on the fabric boundary. Taking advantage of EIT in providing dynamical images of conductivity changes due to pressure induced shape change, the pressure map can be estimated. In this paper, the EIT-based fabric sensor was presented for circular and rectangular sensor geometry. A stretch sensitive fabric was used in circular sensor with 16 electrodes and a pressure sensitive fabric was used in a rectangular sensor with 32 electrodes. A preliminary human test was carried out with the rectangular sensor for foot pressure mapping showing promising results.

An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method

PubMed Central

Park, Dong-Sam; Yun, Dae-Jin; Cho, Myeong-Woo; Shin, Bong-Cheol

2007-01-01

This study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary experiments, the effects of the blasting pressure, the mass flow rate of abrasive and the number of nozzle scanning times on erosion depth of the Pyrex and the soda lime glasses were examined. From the experimental results, optimal blasting conditions were selected for the Pyrex glass machining. The dimensions of the designed glass sensor was 1.7×1.7×0.6mm for the vibrating mass, and 2.9×0.7×0.2mm for the cantilever beam. The machining results showed that the dimensional errors of the machined glass sensor ranged from 3 μm in minimum to 20 μm in maximum. These results imply that the micro powder blasting method can be applied for the micromachining of glass-based acceleration sensors to replace the exiting method.

Foil Strain Gauges Using Piezoresistive Carbon Nanotube Yarn: Fabrication and Calibration

PubMed Central

Góngora-Rubio, Mário R.; Kiyono, César Y.; Mello, Luis A. M.; Cardoso, Valtemar F.; Rosa, Reinaldo L. S.; Kuebler, Derek A.; Brodeur, Grace E.; Alotaibi, Amani H.; Coene, Marisa P.; Coene, Lauren M.; Jean, Elizabeth; Santiago, Rafael C.; Oliveira, Francisco H. A.; Rangel, Ricardo; Thomas, Gilles P.; Belay, Kalayu; da Silva, Luciana W.; Moura, Rafael T.; Seabra, Antonio C.; Silva, Emílio C. N.

2018-01-01

Carbon nanotube yarns are micron-scale fibers comprised by tens of thousands of carbon nanotubes in their cross section and exhibiting piezoresistive characteristics that can be tapped to sense strain. This paper presents the details of novel foil strain gauge sensor configurations comprising carbon nanotube yarn as the piezoresistive sensing element. The foil strain gauge sensors are designed using the results of parametric studies that maximize the sensitivity of the sensors to mechanical loading. The fabrication details of the strain gauge sensors that exhibit the highest sensitivity, based on the modeling results, are described including the materials and procedures used in the first prototypes. Details of the calibration of the foil strain gauge sensors are also provided and discussed in the context of their electromechanical characterization when bonded to metallic specimens. This characterization included studying their response under monotonic and cyclic mechanical loading. It was shown that these foil strain gauge sensors comprising carbon nanotube yarn are sensitive enough to capture strain and can replicate the loading and unloading cycles. It was also observed that the loading rate affects their piezoresistive response and that the gauge factors were all above one order of magnitude higher than those of typical metallic foil strain gauges. Based on these calibration results on the initial sensor configurations, new foil strain gauge configurations will be designed and fabricated, to increase the strain gauge factors even more. PMID:29401745

Low-cost fabrication of highly sensitive room temperature hydrogen sensor based on ordered mesoporous Co-doped TiO2 structure

NASA Astrophysics Data System (ADS)

Li, Zhong; Haidry, Azhar Ali; Wang, Tao; Yao, Zheng Jun

2017-07-01

The development of cost-effective gas sensors with improved sensing properties and minimum power consumption for room temperature hydrogen leakage monitoring is in increasing demand. In this context, this report focus on the facile fabrication of ordered mesoporous TiO2 via evaporation-induced self-assembly route. With the controlled doping threshold (3%Co-TiO2), the output resistance change to 1000 ppm H2 is ˜4.1 × 103 with the response time of 66 s. The sensor response exhibits power law dependence with an increase in the hydrogen concentration, where the power law coefficient was found not only specific to the kind of target gas but also related to temperature. Further, the effect of structure integrity with doping level and humidity on sensing characteristics is interpreted in terms of variation in surface potential eVS and depletion region w caused by the adsorption of molecular oxygen O2-.

Solvent-free fabrication of biodegradable hot-film flow sensor for noninvasive respiratory monitoring

NASA Astrophysics Data System (ADS)

Dinh, Toan; Phan, Hoang-Phuong; Nguyen, Tuan-Khoa; Qamar, Afzaal; Woodfield, Peter; Zhu, Yong; Nguyen, Nam-Trung; Viet Dao, Dzung

2017-06-01

In this paper, we report on a low-cost, environment-friendly and wearable thermal flow sensor, which can be manufactured in-house using pencil graphite as a sensing hot film and biodegradable printing paper as a substrate, without using any toxic solvents or cleanroom facilities. The hot film flow sensor offers excellent performance such as high signal-to-noise ratio (≥slant 40 for an air flow velocity of 1 m s-1), high sensitivity to airflow (53.7 mV(m s-1)-0.8) and outstanding long-term stability (almost no drift in 24 h). The sensor can be comfortably affixed to the philtrum of patients and measures human respiration in realtime. The results indicate that the wearable thermal flow sensors fabricated by this solvent-free and user-friendly method could be employed in human respiratory monitoring.

Highly Sensitive H2S Sensor Based on the Metal-Catalyzed SnO2 Nanocolumns Fabricated by Glancing Angle Deposition

PubMed Central

Yoo, Kwang Soo; Han, Soo Deok; Moon, Hi Gyu; Yoon, Seok-Jin; Kang, Chong-Yun

2015-01-01

As highly sensitive H2S gas sensors, Au- and Ag-catalyzed SnO2 thin films with morphology-controlled nanostructures were fabricated by using e-beam evaporation in combination with the glancing angle deposition (GAD) technique. After annealing at 500 °C for 40 h, the sensors showed a polycrystalline phase with a porous, tilted columnar nanostructure. The gas sensitivities (S = Rgas/Rair) of Au and Ag-catalyzed SnO2 sensors fabricated by the GAD process were 0.009 and 0.015, respectively, under 5 ppm H2S at 300 °C, and the 90% response time was approximately 5 s. These sensors showed excellent sensitivities compared with the SnO2 thin film sensors that were deposited normally (glancing angle = 0°, S = 0.48). PMID:26134105

High-performance flexible hydrogen sensor made of WS2 nanosheet-Pd nanoparticle composite film

NASA Astrophysics Data System (ADS)

Kuru, Cihan; Choi, Duyoung; Kargar, Alireza; Liu, Chin Hung; Yavuz, Serdar; Choi, Chulmin; Jin, Sungho; Bandaru, Prabhakar R.

2016-05-01

We report a flexible hydrogen sensor, composed of WS2 nanosheet-Pd nanoparticle composite film, fabricated on a flexible polyimide substrate. The sensor offers the advantages of light-weight, mechanical durability, room temperature operation, and high sensitivity. The WS2-Pd composite film exhibits sensitivity (R 1/R 2, the ratio of the initial resistance to final resistance of the sensor) of 7.8 to 50 000 ppm hydrogen. Moreover, the WS2-Pd composite film distinctly outperforms the graphene-Pd composite, whose sensitivity is only 1.14. Furthermore, the ease of fabrication holds great potential for scalable and low-cost manufacturing of hydrogen sensors.

Fabrication and Testing of a Thin-Film Heat Flux Sensor for a Stirling Convertor

NASA Technical Reports Server (NTRS)

Wilson, Scott D.; Fralick, Gus c.; Wrbanek, John D.; Sayir, Ali

2010-01-01

The NASA Glenn Research Center (GRC) has been testing high-efficiency free-piston Stirling convertors for potential use in radioisotope power systems since 1999. Stirling convertors are being operated for many years to demonstrate a radioisotope power system capable of providing reliable power for potential multiyear missions. Techniques used to monitor the convertors for change in performance include measurements of temperature, pressure, energy addition, and energy rejection. Micro-porous bulk insulation is used in the Stirling convertor test setup to minimize the loss of thermal energy from the electric heat source to the environment. The insulation is characterized before extended operation, enabling correlation of the net thermal energy addition to the convertor. Aging micro-porous bulk insulation changes insulation efficiency, introducing errors in the correlation for net thermal energy addition. A thin-film heat flux sensor was designed and fabricated to directly measure the net thermal energy addition to the Stirling convertor. The fabrication techniques include slipcasting and using Physical Vapor Deposition (PVD). One-micron-thick noble metal thermocouples measure temperature on the surface of an alumina ceramic disk and heat flux is calculated. Fabrication, integration, and test results of a thin-film heat flux sensor are presented.

Fiber Bragg grating fabrication for the implementation of sensors in the electronics and optoelectronics laboratory at BUAP

NASA Astrophysics Data System (ADS)

Bracamontes Rodríguez, Y. E.; Beltrán Pérez, G.; Castillo Mixcóatl, J.; Muñoz Aguirre, S.

2011-09-01

Fiber Bragg gratings (FBG) are important optical devices since they have been quite successful not only in the field of communications but also in sensor systems and optical fiber lasers. In the sensors area they are generally used as detection elements for different physical parameters such as temperature, strain, flow, etc. In the electronics and optoelectronics laboratory at Benemérita Universidad Autónoma de Puebla (LEyO-BUAP), there are already experimental setups of sensors as well as laser systems, where FBGs are fundamental elements for their adequate performance. However, these FBGs are commercial devices and they present limited characteristics in their transmission profiles, bandwidth and reflectivity. On the other hand, in some occasions, the delivery time from the fabricant to the customer is quite long. Therefore, it is important for LEyO to implement a system to fabricate this kind of devices, which would mean LEyO independence in the technological development. In this work, results of FBGs fabrication based on the phase mask technique are presented. Such mask is optimized for UV and it has a period of 1060 nm. A Nd:YAG pulsed laser with a 5 ns pulse length and an energy of 40 mJ was used as the UV source employing the 4th harmonic generation to obtain a 266 nm wavelength. Ge-doped fiber was used to fabricate the devices.

Highly sensitive SnO2 sensor via reactive laser-induced transfer

PubMed Central

Palla Papavlu, Alexandra; Mattle, Thomas; Temmel, Sandra; Lehmann, Ulrike; Hintennach, Andreas; Grisel, Alain; Wokaun, Alexander; Lippert, Thomas

2016-01-01

Gas sensors based on tin oxide (SnO2) and palladium doped SnO2 (Pd:SnO2) active materials are fabricated by a laser printing method, i.e. reactive laser-induced forward transfer (rLIFT). Thin films from tin based metal-complex precursors are prepared by spin coating and then laser transferred with high resolution onto sensor structures. The devices fabricated by rLIFT exhibit low ppm sensitivity towards ethanol and methane as well as good stability with respect to air, moisture, and time. Promising results are obtained by applying rLIFT to transfer metal-complex precursors onto uncoated commercial gas sensors. We could show that rLIFT onto commercial sensors is possible if the sensor structures are reinforced prior to printing. The rLIFT fabricated sensors show up to 4 times higher sensitivities then the commercial sensors (with inkjet printed SnO2). In addition, the selectivity towards CH4 of the Pd:SnO2 sensors is significantly enhanced compared to the pure SnO2 sensors. Our results indicate that the reactive laser transfer technique applied here represents an important technical step for the realization of improved gas detection systems with wide-ranging applications in environmental and health monitoring control. PMID:27118531

Facile fabrication of wire-type indium gallium zinc oxide thin-film transistors applicable to ultrasensitive flexible sensors.

PubMed

Kim, Yeong-Gyu; Tak, Young Jun; Kim, Hee Jun; Kim, Won-Gi; Yoo, Hyukjoon; Kim, Hyun Jae

2018-04-03

We fabricated wire-type indium gallium zinc oxide (IGZO) thin-film transistors (TFTs) using a self-formed cracked template based on a lift-off process. The electrical characteristics of wire-type IGZO TFTs could be controlled by changing the width and density of IGZO wires through varying the coating conditions of template solution or multi-stacking additional layers. The fabricated wire-type devices were applied to sensors after functionalizing the surface. The wire-type pH sensor showed a sensitivity of 45.4 mV/pH, and this value was an improved sensitivity compared with that of the film-type device (27.6 mV/pH). Similarly, when the wire-type device was used as a glucose sensor, it showed more variation in electrical characteristics than the film-type device. The improved sensing properties resulted from the large surface area of the wire-type device compared with that of the film-type device. In addition, we fabricated wire-type IGZO TFTs on flexible substrates and confirmed that such structures were very resistant to mechanical stresses at a bending radius of 10 mm.

Fabrication and Performance of All-Solid-State Chloride Sensors in Synthetic Concrete Pore Solutions

PubMed Central

Gao, Xiaojian; Zhang, Jian; Yang, Yingzi; Deng, Hongwei

2010-01-01

One type of all-solid-state chloride sensor was fabricated using a MnO2 electrode and a Ag/AgCl electrode. The potentiometric response of the sensor to chloride in synthetic concrete pore solutions was systematically studied, and the polarization performance was also evaluated. The results show a good linear relationship between the potential reading of the sensor and the logarithm of chloride activity (concentration ranges from 0.05 to 5.0 M), and the potential value remains stable with increasing immersion time. The existence of K+, Ca2+, Na+ and SO42− ions have little influence on the potentiometric response of the sensor to chloride, but the pH has a significant influence on the potential value of the sensor at low chloride concentration. The potential reading of the sensor increases linearly with the solution temperature over the range from 5 to 45 °C. Meanwhile, an excellent polarization behavior is proven by galvanostatic and potentiodynamic tests. All of the results reveal that the developed sensor has a great potential for monitoring chloride ions in concrete environments. PMID:22163467

Fabrication and performance of all-solid-state chloride sensors in synthetic concrete pore solutions.

PubMed

Gao, Xiaojian; Zhang, Jian; Yang, Yingzi; Deng, Hongwei

2010-01-01

One type of all-solid-state chloride sensor was fabricated using a MnO(2) electrode and a Ag/AgCl electrode. The potentiometric response of the sensor to chloride in synthetic concrete pore solutions was systematically studied, and the polarization performance was also evaluated. The results show a good linear relationship between the potential reading of the sensor and the logarithm of chloride activity (concentration ranges from 0.05 to 5.0 M), and the potential value remains stable with increasing immersion time. The existence of K(+), Ca(2+), Na(+) and SO(4) (2-) ions have little influence on the potentiometric response of the sensor to chloride, but the pH has a significant influence on the potential value of the sensor at low chloride concentration. The potential reading of the sensor increases linearly with the solution temperature over the range from 5 to 45 °C. Meanwhile, an excellent polarization behavior is proven by galvanostatic and potentiodynamic tests. All of the results reveal that the developed sensor has a great potential for monitoring chloride ions in concrete environments.

Tattoolike Polyaniline Microparticle-Doped Gold Nanowire Patches as Highly Durable Wearable Sensors.

PubMed

Gong, Shu; Lai, Daniel T H; Wang, Yan; Yap, Lim Wei; Si, Kae Jye; Shi, Qianqian; Jason, Naveen Noah; Sridhar, Tam; Uddin, Hemayet; Cheng, Wenlong

2015-09-09

Wearable and highly sensitive strain sensors are essential components of electronic skin for future biomonitoring and human machine interfaces. Here we report a low-cost yet efficient strategy to dope polyaniline microparticles into gold nanowire (AuNW) films, leading to 10 times enhancement in conductivity and ∼8 times improvement in sensitivity. Simultaneously, tattoolike wearable sensors could be fabricated simply by a direct "draw-on" strategy with a Chinese penbrush. The stretchability of the sensors could be enhanced from 99.7% to 149.6% by designing curved tattoo with different radius of curvatures. We also demonstrated roller coating method to encapusulate AuNWs sensors, exhibiting excellent water resistibility and durability. Because of improved conductivity of our sensors, they can directly interface with existing wireless circuitry, allowing for fabrication of wireless flexion sensors for a human finger-controlled robotic arm system.

Fabrication and characterization of resonant SOI micromechanical silicon sensors based on DRIE micromachining, freestanding release process and silicon direct bonding

NASA Astrophysics Data System (ADS)

Gigan, Olivier; Chen, Hua; Robert, Olivier; Renard, Stephane; Marty, Frederic

2002-11-01

This paper is dedicated to the fabrication and technological aspect of a silicon microresonator sensor. The entire project includes the fabrication processes, the system modelling/simulation, and the electronic interface. The mechanical model of such resonator is presented including description of frequency stability and Hysterises behaviour of the electrostatically driven resonator. Numeric model and FEM simulations are used to simulate the system dynamic behaviour. The complete fabrication process is based on standard microelectronics technology with specific MEMS technological steps. The key steps are described: micromachining on SOI by Deep Reactive Ion Etching (DRIE), specific release processes to prevent sticking (resist and HF-vapour release process) and collective vacuum encapsulation by Silicon Direct Bonding (SDB). The complete process has been validated and prototypes have been fabricated. The ASIC was designed to interface the sensor and to control the vibration amplitude. This electronic was simulated and designed to work up to 200°C and implemented in a standard 0.6μ CMOS technology. Characterizations of sensor prototypes are done both mechanically and electrostatically. These measurements showed good agreements with theory and FEM simulations.

Fabrication of Low Cost Surface Acoustic Wave Sensors Using Direct Printing by Aerosol Inkjet

DOE PAGES

Morales-Rodriguez, Marissa E.; Joshi, Pooran C.; Humphries, James R.; ...

2018-04-09

Advancements in additive manufacturing techniques, printed electronics, and nanomaterials have made it possible for the cost-effective fabrication of sensors and systems. Low-cost sensors for continuous and real time monitoring of physical and chemical parameters will directly impact the energy-efficiency, safety, and manufacturing challenges of diverse technology sectors. In this paper, we present the design, printing, and characterization of a two-port surface acoustic wave (SAW) integrated on LiNbO 3 substrate. The aerosol jet printer was used for direct-writing of interdigitated transducers for SAW devices with center frequency in the range of 40-87 MHz. In conclusion, the linear response of a temperaturemore » sensor based on the SAW design shows promise for direct-writing of environmental sensors on low-temperature substrates.« less

Fabrication of Low Cost Surface Acoustic Wave Sensors Using Direct Printing by Aerosol Inkjet

DOE Office of Scientific and Technical Information (OSTI.GOV)

Morales-Rodriguez, Marissa E.; Joshi, Pooran C.; Humphries, James R.

Advancements in additive manufacturing techniques, printed electronics, and nanomaterials have made it possible for the cost-effective fabrication of sensors and systems. Low-cost sensors for continuous and real time monitoring of physical and chemical parameters will directly impact the energy-efficiency, safety, and manufacturing challenges of diverse technology sectors. In this paper, we present the design, printing, and characterization of a two-port surface acoustic wave (SAW) integrated on LiNbO 3 substrate. The aerosol jet printer was used for direct-writing of interdigitated transducers for SAW devices with center frequency in the range of 40-87 MHz. In conclusion, the linear response of a temperaturemore » sensor based on the SAW design shows promise for direct-writing of environmental sensors on low-temperature substrates.« less

Tattoo-based potentiometric ion-selective sensors for epidermal pH monitoring.

PubMed

Bandodkar, Amay J; Hung, Vinci W S; Jia, Wenzhao; Valdés-Ramírez, Gabriela; Windmiller, Joshua R; Martinez, Alexandra G; Ramírez, Julian; Chan, Garrett; Kerman, Kagan; Wang, Joseph

2013-01-07

This article presents the fabrication and characterization of novel tattoo-based solid-contact ion-selective electrodes (ISEs) for non-invasive potentiometric monitoring of epidermal pH levels. The new fabrication approach combines commercially available temporary transfer tattoo paper with conventional screen printing and solid-contact polymer ISE methodologies. The resulting tattoo-based potentiometric sensors exhibit rapid and sensitive response to a wide range of pH changes with no carry-over effects. Furthermore, the tattoo ISE sensors endure repetitive mechanical deformation, which is a key requirement of wearable and epidermal sensors. The flexible and conformal nature of the tattoo sensors enable them to be mounted on nearly any exposed skin surface for real-time pH monitoring of the human perspiration, as illustrated from the response during a strenuous physical activity. The resulting tattoo-based ISE sensors offer considerable promise as wearable potentiometric sensors suitable for diverse applications.

Bioinspired Flexible and Highly Responsive Dual-Mode Strain/Magnetism Composite Sensor.

PubMed

Huang, Pei; Li, Yuan-Qing; Yu, Xiao-Guang; Zhu, Wei-Bin; Nie, Shu-Yan; Zhang, Hao; Liu, Jin-Rui; Hu, Ning; Fu, Shao-Yun

2018-04-04

The mimicry of human skin to detect both oncoming and physical-contacting object is of great importance in the fields of manufacturing, artificial robots and vehicles, etc. Herein, a novel bioinspired flexible and highly responsive dual-mode strain/magnetism composite sensor, which works via both contact and contactless modes, is first fabricated by incorporating Fe 3 O 4 /silicone system into a carbon fiber aerogel (CFA). The distance dependence of magnetic field endorses the CFA/Fe 3 O 4 /silicone composite possible for spatial sensing due to the introduction of Fe 3 O 4 magnetic nanoparticles. As a result, the as-prepared flexible sensor exhibits precise and real-time response not only to direct-contact compression as usual but also to contactless magnetic field in a wide frequency range from 0.1 to 10 Hz, achieving the maximum variance of 68% and 86% in relative electrical resistance, respectively. The contact and contactless sensing modes of the strain/magnetism sensor are clearly demonstrated by recording the speeds of bicycle riding and walking, respectively. Interestingly, this dual-mode composite sensor exhibits the capacity of identifying the contact and contactless state, which is the first report for flexible sensors. The current protocol is eco-friendly, facile, and thought-provoking for the fabrication of multifunctional sensors.

Micro optical fiber light source and sensor and method of fabrication thereof

DOEpatents

Kopelman, Raoul; Tan, Weihong; Shi, Zhong-You

1997-01-01

This invention relates generally to the development of and a method of fabricating a fiber optic micro-light source and sensor (50). An optical fiber micro-light source (50) is presented whose aperture is extremely small yet able to act as an intense light source. Light sources of this type have wide ranging applications, including use as micro-sensors (22) in NSOM. Micro-sensor light sources have excellent detection limits as well as photo stability, reversibility, and millisecond response times. Furthermore, a method for manufacturing a micro optical fiber light source is provided. It involves the photo-chemical attachment of an optically active material onto the end surface of an optical fiber cable which has been pulled to form an end with an extremely narrow aperture. More specifically, photopolymerization has been applied as a means to photo-chemically attach an optically active material (60). This process allows significant control of the size of the micro light source (50). Furthermore, photo-chemically attaching an optically active material (60) enables the implementation of the micro-light source in a variety of sensor applications.

Micro optical fiber light source and sensor and method of fabrication thereof

DOEpatents

Kopelman, R.; Tan, W.; Shi, Z.Y.

1997-05-06

This invention relates generally to the development of and a method of fabricating a fiber optic micro-light source and sensor. An optical fiber micro-light source is presented whose aperture is extremely small yet able to act as an intense light source. Light sources of this type have wide ranging applications, including use as micro-sensors in NSOM. Micro-sensor light sources have excellent detection limits as well as photo stability, reversibility, and millisecond response times. Furthermore, a method for manufacturing a micro optical fiber light source is provided. It involves the photo-chemical attachment of an optically active material onto the end surface of an optical fiber cable which has been pulled to form an end with an extremely narrow aperture. More specifically, photopolymerization has been applied as a means to photo-chemically attach an optically active material. This process allows significant control of the size of the micro light source. Furthermore, photo-chemically attaching an optically active material enables the implementation of the micro-light source in a variety of sensor applications. 10 figs.

Archimedean Spiral Pairs with no Electrical Connections as a Passive Wireless Implantable Sensor

PubMed Central

Drazan, John F; Gunko, Aleksandra; Dion, Matthew; Abdoun, Omar; Cady, Nathaniel C; Connor, Kenneth A; Ledet, Eric H

2015-01-01

We have developed, modeled, fabricated, and tested a passive wireless sensor system that exhibits a linear frequency-displacement relationship. The displacement sensor is comprised of two anti-aligned Archimedean coils separated by an insulating dielectric layer. There are no electrical connections between the two coils and there are no onboard electronics. The two coils are inductively and capacitively coupled due to their close proximity. The sensor system is interrogated wirelessly by monitoring the return loss parameter from a vector network analyzer. The resonant frequency of the sensor is dependent on the displacement between the two coils. Due to changes in the inductive and capacitive coupling between the coils at different distances, the resonant frequency is modulated by coil separation. In a specified range, the frequency shift can be linearized with respect to coil separation. Batch fabrication techniques were used to fabricate copper coils for experimental testing with air as the dielectric. Through testing, we validated the performance of sensors as predicted within acceptable errors. Because of its simplicity, this displacement sensor has potential applications for in vivo sensing. PMID:27430033

Facile fabrication of a well-ordered porous Cu-doped SnO2 thin film for H2S sensing.

PubMed

Zhang, Shumin; Zhang, Pingping; Wang, Yun; Ma, Yanyun; Zhong, Jun; Sun, Xuhui

2014-09-10

Well-ordered Cu-doped and undoped SnO2 porous thin films with large specific surface areas have been fabricated on a desired substrate using a self-assembled soft template combined with simple physical cosputtering deposition. The Cu-doped SnO2 porous film gas sensor shows a significant enhancement in its sensing performance, including a high sensitivity, selectivity, and a fast response and recovery time. The sensitivity of the Cu-doped SnO2 porous sensor is 1 order of magnitude higher than that of the undoped SnO2 sensor, with average response and recovery times to 100 ppm of H2S of ∼ 10.1 and ∼ 42.4 s, respectively, at the optimal operating temperature of 180 °C. The well-defined porous sensors fabricated by the method also exhibit high reproducibility because of the accurately controlled fabrication process. The facile process can be easily extended to the fabrication of other semiconductor oxide gas sensors with easy doping and multilayer porous nanostructure for practical sensing applications.

Fabrication and Testing of a Thin-Film Heat Flux Sensor for a Stirling Convertor

NASA Technical Reports Server (NTRS)

Wilson, Scott D.; Fralick, Gustave; Wrbanek, John; Sayir, Ali

2009-01-01

The NASA Glenn Research Center (GRC) has been testing high efficiency free-piston Stirling convertors for potential use in radioisotope power systems since 1999. Stirling convertors are being operated for many years to demonstrate a radioisotope power system capable of providing reliable power for potential multi-year missions. Techniques used to monitor the convertors for change in performance include measurements of temperature, pressure, energy addition, and energy rejection. Micro-porous bulk insulation is used in the Stirling convertor test set up to minimize the loss of thermal energy from the electric heat source to the environment. The insulation is characterized before extended operation, enabling correlation of the net thermal energy addition to the convertor. Aging microporous bulk insulation changes insulation efficiency, introducing errors in the correlation for net thermal energy addition. A thin-mm heat flux sensor was designed and fabricated to directly measure the net thermal energy addition to the Stirling convertor. The fabrication techniques include slip casting and using Physical Vapor Deposition (PVD). One micron thick noble metal thermocouples measure temperature on the surface of an Alumina ceramic disc and heat flux is calculated. Fabrication, integration, and test results of a thin film heat flux sensor are presented.

Polyaniline-graphene oxide nanocomposite sensor for quantification of calcium channel blocker levamlodipine.

PubMed

Jain, Rajeev; Sinha, Ankita; Khan, Ab Lateef

2016-08-01

A novel polyaniline-graphene oxide nanocomposite (PANI/GO/GCE) sensor has been fabricated for quantification of a calcium channel blocker drug levamlodipine (LAMP). Fabricated sensor has been characterized by electrochemical impedance spectroscopy, square wave and cyclic voltammetry, Raman spectroscopy and Fourier transform infrared (FTIR) spectroscopy. The developed PANI/GO/GCE sensor has excellent analytical performance towards electrocatalytic oxidation as compared to PANI/GCE, GO/GCE and bare GCE. Under optimized experimental conditions, the fabricated sensor exhibits a linear response for LAMP for its oxidation over a concentration range from 1.25μgmL(-1) to 13.25μgmL(-1) with correlation coefficient of 0.9950 (r(2)), detection limit of 1.07ngmL(-1) and quantification limit of 3.57ngmL(-1). The sensor shows an excellent performance for detecting LAMP with reproducibility of 2.78% relative standard deviation (RSD). The proposed method has been successfully applied for LAMP determination in pharmaceutical formulation with a recovery from 99.88% to 101.75%. Copyright © 2015 Elsevier B.V. All rights reserved.

Tunable-Sensitivity flexible pressure sensor based on graphene transparent electrode

NASA Astrophysics Data System (ADS)

Luo, Shi; Yang, Jun; Song, Xuefen; Zhou, Xi; Yu, Leyong; Sun, Tai; Yu, Chongsheng; Huang, Deping; Du, Chunlei; Wei, Dapeng

2018-07-01

Tunable-sensitivity and flexibility are considered as two crucial characteristics for future pressure sensors or electronic skins. By the theoretical calculation model, we simulated the relationship curve between the sensitivity and PDMS pyramids with different spacings, and found that the spacing of pyramids is a main factor to affect the sensitivity of the capacitance pressure sensor. Furthermore, we fabricated the capacitance pressure sensors using graphene electrodes and the PDMS pyramid dielectric layers with different spacings. The measurement data were consistent with the simulation results that the sensitivity increases with the spacing of pyramids. In addition, graphene electrode exhibits prefect flexibility and reliability, while the ITO electrode would be destroyed rapidly after bending. These graphene pressure sensors exhibit the potential in the application in the wearable products for monitoring breath, pulse, and other physiological signals.

Eraser-based eco-friendly fabrication of a skin-like large-area matrix of flexible carbon nanotube strain and pressure sensors

NASA Astrophysics Data System (ADS)

Sahatiya, Parikshit; Badhulika, Sushmee

2017-03-01

This paper reports a new type of electronic, recoverable skin-like pressure and strain sensor, produced on a flexible, biodegradable pencil-eraser substrate and fabricated using a solvent-free, low-cost and energy efficient process. Multi-walled carbon nanotube (MWCNT) film, the strain sensing element, was patterned on pencil eraser with a rolling pin and a pre-compaction mechanical press. This induces high interfacial bonding between the MWCNTs and the eraser substrate, which enables the sensor to achieve recoverability under ambient conditions. The eraser serves as a substrate for strain sensing, as well as acting as a dielectric for capacitive pressure sensing, thereby eliminating the dielectric deposition step, which is crucial in capacitive-based pressure sensors. The strain sensing transduction mechanism is attributed to the tunneling effect, caused by the elastic behavior of the MWCNTs and the strong mechanical interlock between MWCNTs and the eraser substrate, which restricts slippage of MWCNTs on the eraser thereby minimizing hysteresis. The gauge factor of the strain sensor was calculated to be 2.4, which is comparable to and even better than most of the strain and pressure sensors fabricated with more complex designs and architectures. The sensitivity of the capacitive pressure sensor was found to be 0.135 MPa-1.To demonstrate the applicability of the sensor as artificial electronic skin, the sensor was assembled on various parts of the human body and corresponding movements and touch sensation were monitored. The entire fabrication process is scalable and can be integrated into large areas to map spatial pressure distributions. This low-cost, easily scalable MWCNT pin-rolled eraser-based pressure and strain sensor has huge potential in applications such as artificial e-skin in flexible electronics and medical diagnostics, in particular in surgery as it provides high spatial resolution without a complex nanostructure architecture.

Eraser-based eco-friendly fabrication of a skin-like large-area matrix of flexible carbon nanotube strain and pressure sensors.

PubMed

Sahatiya, Parikshit; Badhulika, Sushmee

2017-03-03

This paper reports a new type of electronic, recoverable skin-like pressure and strain sensor, produced on a flexible, biodegradable pencil-eraser substrate and fabricated using a solvent-free, low-cost and energy efficient process. Multi-walled carbon nanotube (MWCNT) film, the strain sensing element, was patterned on pencil eraser with a rolling pin and a pre-compaction mechanical press. This induces high interfacial bonding between the MWCNTs and the eraser substrate, which enables the sensor to achieve recoverability under ambient conditions. The eraser serves as a substrate for strain sensing, as well as acting as a dielectric for capacitive pressure sensing, thereby eliminating the dielectric deposition step, which is crucial in capacitive-based pressure sensors. The strain sensing transduction mechanism is attributed to the tunneling effect, caused by the elastic behavior of the MWCNTs and the strong mechanical interlock between MWCNTs and the eraser substrate, which restricts slippage of MWCNTs on the eraser thereby minimizing hysteresis. The gauge factor of the strain sensor was calculated to be 2.4, which is comparable to and even better than most of the strain and pressure sensors fabricated with more complex designs and architectures. The sensitivity of the capacitive pressure sensor was found to be 0.135 MPa -1 .To demonstrate the applicability of the sensor as artificial electronic skin, the sensor was assembled on various parts of the human body and corresponding movements and touch sensation were monitored. The entire fabrication process is scalable and can be integrated into large areas to map spatial pressure distributions. This low-cost, easily scalable MWCNT pin-rolled eraser-based pressure and strain sensor has huge potential in applications such as artificial e-skin in flexible electronics and medical diagnostics, in particular in surgery as it provides high spatial resolution without a complex nanostructure architecture.

Fabrication and Characterization of Flexible and Miniaturized Humidity Sensors Using Screen-Printed TiO2 Nanoparticles as Sensitive Layer

PubMed Central

Dubourg, Georges; Segkos, Apostolos; Katona, Jaroslav; Radović, Marko; Savić, Slavica; Crnojević-Bengin, Vesna

2017-01-01

This paper describes the fabrication and the characterization of an original example of a miniaturized resistive-type humidity sensor, printed on flexible substrate in a large-scale manner. The fabrication process involves laser ablation for the design of interdigitated electrodes on PET (Poly-Ethylene Terephthalate) substrate and a screen-printing process for the deposition of the sensitive material, which is based on TiO2 nanoparticles. The laser ablation process was carefully optimized to obtain micro-scale and well-resolved electrodes on PET substrate. A functional paste based on cellulose was prepared in order to allow the precise screen-printing of the TiO2 nanoparticles as sensing material on the top of the electrodes. The current against voltage (I–V) characteristic of the sensor showed good linearity and potential for low-power operation. The results of a humidity-sensing investigation and mechanical testing showed that the fabricated miniaturized sensors have excellent mechanical stability, sensing characteristics, good repeatability, and relatively fast response/recovery times operating at room temperature. PMID:28800063

Fabrication and characterization of 3C-silicon carbide micro sensor for wireless blood pressure measurements

NASA Astrophysics Data System (ADS)

Basak, Nupur

A potentially implantable single crystal 3C-SiC pressure sensor for blood pressure measurement was designed, simulated, fabricated, characterized and optimized. This research uses a single crystal 3C-SiC, for the first time, to demonstrate its application as a blood pressure measurement sensor. The sensor, which uses the epitaxial grown 3C-SiC membrane to measure changes in pressure, is designed to be wireless, biocompatible and linear. The SiC material was chosen for its superior physical, chemical and mechanical properties; the capacitive sensor uses a 3C-SiC membrane as one of the electrodes; and, the sensor system is wireless for comfort and to allow for convenient reading of real-time pressure data (wireless communication is enabled by connecting the sensor parallel to a planar inductor). Together, the variable capacitive sensor and planar inductor create a pressure sensitive resonant circuit. The sensor system described above allows for implantation into a human patient's body, after which the planar inductor can be coupled with an external inductor to receive data for real-time blood pressure measurement. Electroplating, thick photo-resist characterization, RIE etching, oxidation, CVD, chemical mechanical polishing and wafer bonding were optimized during the process of fabricating the sensor system and, in addition to detailing the sensor system simulation and characterization; the optimized processes are detailed in the dissertation. This absolute pressure sensor is designed to function optimally within the human blood pressure range of 50-350mmHg. The layout and modeling of the sensor uses finite element analysis (FEA) software. The simulations for membrane deflection, stress analysis and electro-mechanical analysis are performed for 100 μm2 and 400μm2sensors. The membrane deflection-pressure, capacitance-pressure and resonant frequency-pressure graphs were obtained, and detailed in the dissertation, along with the planar inductor simulation for

Flexible, Stretchable Sensors for Wearable Health Monitoring: Sensing Mechanisms, Materials, Fabrication Strategies and Features

PubMed Central

Liu, Yan; Wang, Hai; Zhao, Wei; Qin, Hongbo; Xie, Yongqiang

2018-01-01

Wearable health monitoring systems have gained considerable interest in recent years owing to their tremendous promise for personal portable health watching and remote medical practices. The sensors with excellent flexibility and stretchability are crucial components that can provide health monitoring systems with the capability of continuously tracking physiological signals of human body without conspicuous uncomfortableness and invasiveness. The signals acquired by these sensors, such as body motion, heart rate, breath, skin temperature and metabolism parameter, are closely associated with personal health conditions. This review attempts to summarize the recent progress in flexible and stretchable sensors, concerning the detected health indicators, sensing mechanisms, functional materials, fabrication strategies, basic and desired features. The potential challenges and future perspectives of wearable health monitoring system are also briefly discussed. PMID:29470408

Flexible, Stretchable Sensors for Wearable Health Monitoring: Sensing Mechanisms, Materials, Fabrication Strategies and Features.

PubMed

Liu, Yan; Wang, Hai; Zhao, Wei; Zhang, Min; Qin, Hongbo; Xie, Yongqiang

2018-02-22

Wearable health monitoring systems have gained considerable interest in recent years owing to their tremendous promise for personal portable health watching and remote medical practices. The sensors with excellent flexibility and stretchability are crucial components that can provide health monitoring systems with the capability of continuously tracking physiological signals of human body without conspicuous uncomfortableness and invasiveness. The signals acquired by these sensors, such as body motion, heart rate, breath, skin temperature and metabolism parameter, are closely associated with personal health conditions. This review attempts to summarize the recent progress in flexible and stretchable sensors, concerning the detected health indicators, sensing mechanisms, functional materials, fabrication strategies, basic and desired features. The potential challenges and future perspectives of wearable health monitoring system are also briefly discussed.

A carbon nanotube based ammonia sensor on cotton textile

NASA Astrophysics Data System (ADS)

Han, Jin-Woo; Kim, Beomseok; Li, Jing; Meyyappan, M.

2013-05-01

A single-wall carbon nanotube (CNT) based ammonia (NH3) sensor was implemented on a cotton yarn. Two types of sensors were fabricated: Au/sensing CNT/Au and conducting/sensing/conducting all CNT structures. Two perpendicular Au wires were designed to contact CNT-cotton yarn for metal-CNT sensor, whereas nanotubes were used for the electrode as well as sensing material for the all CNT sensor. The resistance shift of the CNT network upon NH3 was monitored in a chemiresistor approach. The CNT-cotton yarn sensors exhibited uniformity and repeatability. Furthermore, the sensors displayed good mechanical robustness against bending. The present approach can be utilized for low-cost smart textile applications.

A multilayer membrane amperometric glucose sensor fabricated using planar techniques for large-scale production.

PubMed

Matsumoto, T; Saito, S; Ikeda, S

2006-03-23

This paper reports on a multilayer membrane amperometric glucose sensor fabricated using planar techniques. It is characterized by good reproducibility and suitable for large-scale production. The glucose sensor has 82 electrode sets formed on a single glass substrate, each with a platinum working electrode (WE), a platinum counter electrode (CE) and an Ag/AgCl reference electrode (RE). The electrode sets are coated with a membrane consisting of five layers: gamma-aminopropyltriethoxysilane (gamma-APTES), Nafion, glucose oxidase (GOX), gamma-APTES and perfluorocarbon polymer (PFCP), in that order. Tests have shown that the sensor has acceptably low dispersion (relative standard deviation, R.S.D.=42.9%, n=82), a wide measurement range (1.11-111 mM) and measurement stability over a 27-day period. Measurements of the glucose concentration in a control human urine sample demonstrated that the sensor has very low dispersion (R.S.D.=2.49%, n=10).

Fabrication of a miniaturized capillary waveguide integrated fiber-optic sensor for fluoride determination.

PubMed

Xiong, Yan; Wang, Chengjie; Tao, Tao; Duan, Ming; Tan, Jun; Wu, Jiayi; Wang, Dong

2016-05-10

Fluoride concentration is a key aspect of water quality and essential for human health. Too much or too little fluoride intake from water supplies is harmful to public health. In this study, a capillary waveguide integrated fiber-optic sensor was fabricated for fluoride measurement in water samples. The sensor was modularly designed with three parts, i.e., a light source, capillary flow cell and detector. When light propagated from a light emitting diode (LED) to the capillary waveguide cell through an excitation fiber, it interacted with the sensing reagent, and its intensity changed with different fluoride concentrations. Then, the light propagated to the detector through a detection fiber for absorption determination of fluoride according to Beer's law. This miniaturized sensor showed advantages of fast analysis (9.2 s) and small reagent demand (200 μL) per sample, and it also had a low detection limit (8 ppb) and high selectivity for fluoride determination. The sensor was applied to fluoride determination in different water samples. The results obtained were compared with those obtained by conventional spectrophotometry and ion chromatography, showing agreement and validating the sensor's potential application.

Stretchable hydrogen sensors employing palladium nanosheets transferred onto an elastomeric substrate

NASA Astrophysics Data System (ADS)

Namgung, Gitae; Ta, Qui Thanh Hoai; Noh, Jin-Seo

2018-07-01

Stretchable hydrogen sensors were fabricated from Pd nanosheets that were transferred onto a PDMS substrate. To prepare the Pd nanosheets, a Pd thin film on PDMS was first biaxially stretched and then PDMS substrate was etched off. The size of Pd nanosheets decreased as the applied strain increased and the film thickness decreased. A transfer technique was utilized to implement the stretchable hydrogen sensors. The stretchable sensors exhibited negative response behaviors upon the exposure to hydrogen gas. Interestingly, the sensors worked even under large strains up to 30%, demonstrating a potential as a high-strain-tolerable hydrogen sensor for the first time.

Fabrication of plasmonic nanopore by using electron beam irradiation for optical bio-sensor

NASA Astrophysics Data System (ADS)

Choi, Seong Soo; Park, Myoung Jin; Han, Chul Hee; Oh, Seh Joong; Park, Nam Kyou; Park, Doo Jae; Choi, Soo Bong; Kim, Yong-Sang

2017-05-01

The Au nano-hole surrounded by the periodic nano-patterns would provide the enhanced optical intensity. Hence, the nano-hole surrounded with periodic groove patterns can be utilized as single molecule nanobio optical sensor device. In this report, the nano-hole on the electron beam induced membrane surrounded by periodic groove patterns were fabricated by focused ion beam technique (FIB), field emission scanning electron microscopy (FESEM), and transmission electron microscopy (TEM). Initially, the Au films with three different thickness of 40 nm, 60 nm, and 200 nm were deposited on the SiN film by using an electron beam sputter-deposition technique, followed by removal of the supporting SiN film. The nanopore was formed on the electron beam induced membrane under the FESEM electron beam irradiation. Nanopore formation inside the Au aperture was controlled down to a few nanometer, by electron beam irradiations. The optical intensities from the biomolecules on the surfaces including Au coated pyramid with periodic groove patterns were investigated via surface enhanced Raman spectroscopy (SERS). The fabricated nanopore surrounded by periodic patterns can be utilized as a next generation single molecule bio optical sensor.

Gas sensor

DOEpatents

Schmid, Andreas K.; Mascaraque, Arantzazu; Santos, Benito; de la Figuera, Juan

2014-09-09

A gas sensor is described which incorporates a sensor stack comprising a first film layer of a ferromagnetic material, a spacer layer, and a second film layer of the ferromagnetic material. The first film layer is fabricated so that it exhibits a dependence of its magnetic anisotropy direction on the presence of a gas, That is, the orientation of the easy axis of magnetization will flip from out-of-plane to in-plane when the gas to be detected is present in sufficient concentration. By monitoring the change in resistance of the sensor stack when the orientation of the first layer's magnetization changes, and correlating that change with temperature one can determine both the identity and relative concentration of the detected gas. In one embodiment the stack sensor comprises a top ferromagnetic layer two mono layers thick of cobalt deposited upon a spacer layer of ruthenium, which in turn has a second layer of cobalt disposed on its other side, this second cobalt layer in contact with a programmable heater chip.

Operation tools with dielectric elastomer pressure sensors

NASA Astrophysics Data System (ADS)

Böse, Holger; Müller, Dominik; Ehrlich, Johannes

2017-04-01

New sensors based on dielectric elastomers have recently been shown to exhibit high sensitivity for compression loads. The basic design of these sensors exhibits two profiled surfaces coated with electrode layers between which an elastomer film with the counter-electrode is confined. All components of the sensor are prepared with silicone whose stiffness can be varied in a wide range. Depending on the details of the sensor design, various effects contribute to the enhancement of the capacitance. The intermediate elastomer film is stretched upon compression, the elastomer profiles are deformed and the electrode layers on the elastomer profiles and in the elastomer film approach each other. Beside the detection of pressure, such sensors can also be used for operation tools in human-machine interfaces. To demonstrate this potential, a touch pad with six pressure-sensitive fields is presented. The corresponding sensors integrated in the touch fields detect the exerted forces of the finger, show them on a display and control the brightness of some LEDs. As a second example, the integration of sensor-based control fields on an automotive steering wheel is shown. Finally, the sensors can also be used in fabrics to control arbitrary functions of wearable electronic devices.

Highly Sensitive, Transparent, and Durable Pressure Sensors Based on Sea-Urchin Shaped Metal Nanoparticles.

PubMed

Lee, Donghwa; Lee, Hyungjin; Jeong, Youngjun; Ahn, Yumi; Nam, Geonik; Lee, Youngu

2016-11-01

Highly sensitive, transparent, and durable pressure sensors are fabricated using sea-urchin-shaped metal nanoparticles and insulating polyurethane elastomer. The pressure sensors exhibit outstanding sensitivity (2.46 kPa -1 ), superior optical transmittance (84.8% at 550 nm), fast response/relaxation time (30 ms), and excellent operational durability. In addition, the pressure sensors successfully detect minute movements of human muscles. © 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Quartz Crystal Micro-Balance Gas Sensor with Ink-Jet Printed Nano-Diamond Sensitive Layer

NASA Astrophysics Data System (ADS)

Kulha, Pavel; Kroutil, Jiří; Laposa, Alexandr; Procházka, Václav; Husák, Miroslav

2016-01-01

the paper presents fabrication and characterization of a Quartz Crystal Microbalance based gas sensor with a diamond powder sensitive layer deposited using the ink-jet printing technique. The sensor was exposed to a low concentration of ammonia, acetone vapors and different levels of humidity. Impedance characteristics close to the natural resonant frequency of 10 MHz were examined. The sensor exhibits significant shifts in serial resonant frequency under different gas environments.

No-core fiber-based highly sensitive optical fiber pH sensor.

PubMed

Bhardwaj, Vanita; Pathak, Akhilesh Kumar; Singh, Vinod Kumar

2017-05-01

The present work describes the fabrication and characterization of an optical fiber pH sensor using a sol–gel technique. The sensing head configuration is incorporated using a short section of no-core fiber, coated with tetraethyl orthosilicate and spliced at the end of a single mode fiber with a bulge. Different types of indicators (bromophenol blue, cresol red, and chlorophenol red) were used to achieve a wide pH range from 2 to 13. High sensitivities of the fabricated device were found to be 1.02 and ? 0.93 ?? nm / pH for acidic and alkaline solutions, respectively. From the characterization results, it was noted that there is an impact of ionic strength and an effect of the temperature of liquid on the response characteristic, which is an advantage of the existing device over the other pH sensors. The fabricated sensor exhibited good reflection spectrum, indicating a blueshift in resonance wavelength for alkaline solutions and a redshift for acidic solutions.

Light-controlling, flexible and transparent ethanol gas sensor based on ZnO nanoparticles for wearable devices

PubMed Central

Zheng, Z. Q.; Yao, J. D.; Wang, B.; Yang, G. W.

2015-01-01

In recent years, owing to the significant applications of health monitoring, wearable electronic devices such as smart watches, smart glass and wearable cameras have been growing rapidly. Gas sensor is an important part of wearable electronic devices for detecting pollutant, toxic, and combustible gases. However, in order to apply to wearable electronic devices, the gas sensor needs flexible, transparent, and working at room temperature, which are not available for traditional gas sensors. Here, we for the first time fabricate a light-controlling, flexible, transparentand working at room-temperature ethanol gas sensor by using commercial ZnO nanoparticles. The fabricated sensor not only exhibits fast and excellent photoresponse, but also shows high sensing response to ethanol under UV irradiation. Meanwhile, its transmittance exceeds 62% in the visible spectral range, and the sensing performance keeps the same even bent it at a curvature angle of 90o. Additionally, using commercial ZnO nanoparticles provides a facile and low-cost route to fabricate wearable electronic devices. PMID:26076705

Light-controlling, flexible and transparent ethanol gas sensor based on ZnO nanoparticles for wearable devices.

PubMed

Zheng, Z Q; Yao, J D; Wang, B; Yang, G W

2015-06-16

In recent years, owing to the significant applications of health monitoring, wearable electronic devices such as smart watches, smart glass and wearable cameras have been growing rapidly. Gas sensor is an important part of wearable electronic devices for detecting pollutant, toxic, and combustible gases. However, in order to apply to wearable electronic devices, the gas sensor needs flexible, transparent, and working at room temperature, which are not available for traditional gas sensors. Here, we for the first time fabricate a light-controlling, flexible, transparent, and working at room-temperature ethanol gas sensor by using commercial ZnO nanoparticles. The fabricated sensor not only exhibits fast and excellent photoresponse, but also shows high sensing response to ethanol under UV irradiation. Meanwhile, its transmittance exceeds 62% in the visible spectral range, and the sensing performance keeps the same even bent it at a curvature angle of 90(o). Additionally, using commercial ZnO nanoparticles provides a facile and low-cost route to fabricate wearable electronic devices.

Fabrication of Solid-State Gas Sensors by Drawing: An Undergraduate and High School Introduction to Functional Nanomaterials and Chemical Detection

ERIC Educational Resources Information Center

Smith, Merry K.; Martin-Peralta, Daphnie G.; Pivak, Polina A.; Mirica, Katherine A.

2017-01-01

Carbon nanomaterials have promising utility in chemical sensing including applications in preserving occupational safety, monitoring of environmental pollution, and human health. While recent advances in device fabrication and molecular design of functional materials have enabled rapid fabrication of chemical sensors from carbon nanomaterials,…

Sensor fabrication method for in situ temperature and humidity monitoring of light emitting diodes.

PubMed

Lee, Chi-Yuan; Su, Ay; Liu, Yin-Chieh; Chan, Pin-Cheng; Lin, Chia-Hung

2010-01-01

In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably and continually measure temperature and humidity. The device is light-weight and can monitor junction temperature and humidity in real time. Using micro-electro-mechanical systems (MEMS), this study minimizes the size of the micro temperature and humidity sensors, which are constructed on a stainless steel foil substrate (40 μm-thick SS-304). The micro temperature and humidity sensors can be fixed between the LED chip and frame. The sensitivities of the micro temperature and humidity sensors are 0.06±0.005 (Ω/°C) and 0.033 pF/%RH, respectively.

Open-Gated pH Sensor Fabricated on an Undoped-AlGaN/GaN HEMT Structure

PubMed Central

Abidin, Mastura Shafinaz Zainal; Hashim, Abdul Manaf; Sharifabad, Maneea Eizadi; Rahman, Shaharin Fadzli Abd; Sadoh, Taizoh

2011-01-01

The sensing responses in aqueous solution of an open-gated pH sensor fabricated on an AlGaN/GaN high-electron-mobility-transistor (HEMT) structure are investigated. Under air-exposed ambient conditions, the open-gated undoped AlGaN/GaN HEMT only shows the presence of a linear current region. This seems to show that very low Fermi level pinning by surface states exists in the undoped AlGaN/GaN sample. In aqueous solution, typical current-voltage (I-V) characteristics with reasonably good gate controllability are observed, showing that the potential of the AlGaN surface at the open-gated area is effectively controlled via aqueous solution by the Ag/AgCl gate electrode. The open-gated undoped AlGaN/GaN HEMT structure is capable of distinguishing pH level in aqueous electrolytes and exhibits linear sensitivity, where high sensitivity of 1.9 mA/pH or 3.88 mA/mm/pH at drain-source voltage, VDS = 5 V is obtained. Due to the large leakage current where it increases with the negative gate voltage, Nernstian like sensitivity cannot be determined as commonly reported in the literature. This large leakage current may be caused by the technical factors rather than any characteristics of the devices. Surprisingly, although there are some imperfections in the device preparation and measurement, the fabricated devices work very well in distinguishing the pH levels. Suppression of current leakage by improving the device preparation is likely needed to improve the device performance. The fabricated device is expected to be suitable for pH sensing applications. PMID:22163786

Piezoelectric Actuator/Sensor Technology at Rockwell

NASA Technical Reports Server (NTRS)

Neurgaonkar, Ratnakar R.

1996-01-01

We describe the state-of-the art of piezoelectric materials based on perovskite and tungsten bronze families for sensor, actuator and smart structure applications. The microstructural defects in these materials have been eliminated to a large extent and the resulting materials exhibit exceedingly high performance for various applications. The performance of Rockwell actuators/sensors is at least 3 times better than commercially available products. These high performance actuators are being incorporated into various applications including, DOD, NASA and commercial. The multilayer actuator stacks fabricated from our piezoceramics are advantageous for sensing and high capacitance applications. In this presentation, we will describe the use of our high performance piezo-ceramics for actuators and sensors, including multilayer stacks and composite structures.

Nanocrystalline Pd:NiFe2O4 thin films: A selective ethanol gas sensor

NASA Astrophysics Data System (ADS)

Rao, Pratibha; Godbole, R. V.; Bhagwat, Sunita

2016-10-01

In this work, Pd:NiFe2O4 thin films were investigated for the detection of reducing gases. These films were fabricated using spray pyrolysis technique and characterized using X-ray diffraction (XRD) to confirm the crystal structure. The surface morphology was studied using scanning electron microscopy (SEM). Magnetization measurements were carried out using SQUID VSM, which shows ferrimagnetic behavior of the samples. These thin film sensors were tested against methanol, ethanol, hydrogen sulfide and liquid petroleum gas, where they were found to be more selective to ethanol. The fabricated thin film sensors exhibited linear response signal for all the gases with concentrations up to 5 w/o Pd. Reduction in optimum operating temperature and enhancement in response was also observed. Pd:NiFe2O4 thin films exhibited faster response and recovery characteristic. These sensors have potential for industrial applications because of their long-term stability, low power requirement and low production cost.

Suitability of surface acoustic wave oscillators fabricated using low temperature-grown AlN films on GaN/sapphire as UV sensors.

PubMed

Chen, Tzu Chieh; Lin, Yueh Ting; Lin, Chung Yi; Chen, W C; Chen, Meei Ru; Kao, Hui-Ling; Chyi, J I; Hsu, C H

2008-02-01

Epitaxial AlN films were prepared on GaN/sapphire using a helicon sputtering system at the low temperature of 300 degrees C. Surface acoustic wave (SAW) devices fabricated on AlN/GaN/sapphire exhibited superior characteristics compared with those made on GaN/sapphire. An oscillator using an AlN/GaN/sapphirebased SAW device is presented. The oscillation frequency decreased when the device was illuminated by ultraviolet (UV) radiation, and the downshift of the oscillation frequency increased with the illuminating UV power density. The results showed that the AlN/GaN/sapphire-layered structure SAW oscillators are suitable for visible blind UV detection and opened up the feasibility of developing remote UV sensors for different ranges of wavelengths on the III-nitrides.

Optical fiber sensors based on nanostructured coatings fabricated by means of the layer-by-layer electrostatic self-assembly method

NASA Astrophysics Data System (ADS)

Arregui, Francisco J.; Matías, Ignacio R.; Claus, Richard O.

2007-07-01

The Layer-by-Layer Electrostatic Self-Assembly (ESA) method has been successfully used for the design and fabrication of nanostructured materials. More specifically, this technique has been applied for the deposition of thin films on optical fibers with the purpose of fabricating different types of optical fiber sensors. In fact, optical fiber sensors for measuring humidity, temperature, pH, hydrogen peroxide, glucose, volatile organic compounds or even gluten have been already experimentally demonstrated. The versatility of this technique allows the deposition of these sensing coatings on flat substrates and complex geometries as well. For instance, nanoFabry-Perots and microgratings have been formed on cleaved ends of optical fibers (flat surfaces) and also sensing coatings have been built onto long period gratings (cylindrical shape), tapered fiber ends (conical shape), biconically tapered fibers or even the internal side of hollow core fibers. Among the different materials used for the construction of these sensing nanostructured coatings, diverse types such as polymers, inorganic semiconductors, colorimetric indicators, fluorescent dyes, quantum dots or even biological elements as enzymes can be found. This technique opens the door to the fabrication of new types of optical fiber sensors.

Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process

PubMed Central

Liao, Wei-Zhen; Dai, Ching-Liang; Yang, Ming-Zhi

2013-01-01

The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated electrodes. The sensitive film is zinc oxide prepared by the sol-gel method, and it is coated on the interdigitated electrodes. The heater is located under the interdigitated electrodes, and it is used to supply a working temperature to the sensitive film. The sensor needs a post-processing step to remove the sacrificial oxide layer, and to coat zinc oxide on the interdigitated electrodes. When the sensitive film senses ethanol gas, the resistance of the sensor generates a change. An inverting amplifier circuit is utilized to convert the resistance variation of the sensor into the output voltage. Experiments show that the sensitivity of the ethanol sensor is 0.35 mV/ppm. PMID:24072022

Micro ethanol sensors with a heater fabricated using the commercial 0.18 μm CMOS process.

PubMed

Liao, Wei-Zhen; Dai, Ching-Liang; Yang, Ming-Zhi

2013-09-25

The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 µm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated electrodes. The sensitive film is zinc oxide prepared by the sol-gel method, and it is coated on the interdigitated electrodes. The heater is located under the interdigitated electrodes, and it is used to supply a working temperature to the sensitive film. The sensor needs a post-processing step to remove the sacrificial oxide layer, and to coat zinc oxide on the interdigitated electrodes. When the sensitive film senses ethanol gas, the resistance of the sensor generates a change. An inverting amplifier circuit is utilized to convert the resistance variation of the sensor into the output voltage. Experiments show that the sensitivity of the ethanol sensor is 0.35 mV/ppm.

Micro optical fiber light source and sensor and method of fabrication thereof

DOEpatents

Kopelman, Raoul; Tan, Weihong; Shi, Zhong-You

1994-01-01

This invention relates generally to the development of and a method of fabricating a micro optical fiber light source. An optical fiber micro-light source is presented whose aperture is extremely small yet able to act as an intense light source. Light sources of this type have wide ranging applications, including use as micro-sensors in NSOM. Micro-sensor light sources have excellent detection limits as well as photo stability, reversibility, and millisecond response times. Furthermore, a method for manufacturing a micro optical fiber light source is provided. It involves the photo-chemical attachment of an optically active material onto the end surface of an optical fiber cable which has been pulled to form an end with an extremely narrow aperture. More specifically, photopolymerization has been applied as a means to photo-chemically attach an optically active material. This process allows significant control of the size of the micro light source. Furthermore, photo-chemically attaching an optically active material enables the implementation of the micro-light source in a variety of sensor applications.

Micro optical fiber light source and sensor and method of fabrication thereof

DOEpatents

Kopelman, R.; Tan, W.; Shi, Z.Y.

1994-11-01

This invention relates generally to the development of and a method of fabricating a micro optical fiber light source. An optical fiber micro-light source is presented whose aperture is extremely small yet able to act as an intense light source. Light sources of this type have wide ranging applications, including use as micro-sensors in NSOM. Micro-sensor light sources have excellent detection limits as well as photo stability, reversibility, and millisecond response times. Furthermore, a method for manufacturing a micro optical fiber light source is provided. It involves the photo-chemical attachment of an optically active material onto the end surface of an optical fiber cable which has been pulled to form an end with an extremely narrow aperture. More specifically, photopolymerization has been applied as a means to photo-chemically attach an optically active material. This process allows significant control of the size of the micro light source. Furthermore, photo-chemically attaching an optically active material enables the implementation of the micro-light source in a variety of sensor applications. 4 figs.

Fabrication and Characteristics of an nc-Si/c-Si Heterojunction MOSFETs Pressure Sensor

PubMed Central

Zhao, Xiaofeng; Wen, Dianzhong; Li, Gang

2012-01-01

A novel nc-Si/c-Si heterojunction MOSFETs pressure sensor is proposed in this paper, with four p-MOSFETs with nc-Si/c-Si heterojunction as source and drain. The four p-MOSFETs are designed and fabricated on a square silicon membrane by CMOS process and MEMS technology where channel resistances of the four nc-Si/c-Si heterojunction MOSFETs form a Wheatstone bridge. When the additional pressure is P, the nc-Si/c-Si heterojunction MOSFETs pressure sensor can measure this additional pressure P. The experimental results show that when the supply voltage is 3 V, length-width (L:W) ratio is 2:1, and the silicon membrane thickness is 75 μm, the full scale output voltage of the pressure sensor is 15.50 mV at room temperature, and pressure sensitivity is 0.097 mV/kPa. When the supply voltage and L:W ratio are the same as the above, and the silicon membrane thickness is 45 μm, the full scale output voltage is 43.05 mV, and pressure sensitivity is 2.153 mV/kPa. Therefore, the sensor has higher sensitivity and good temperature characteristics compared to the traditional piezoresistive pressure sensor. PMID:22778646

Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers

NASA Astrophysics Data System (ADS)

Duff, S. M.; Austermann, J.; Beall, J. A.; Becker, D.; Datta, R.; Gallardo, P. A.; Henderson, S. W.; Hilton, G. C.; Ho, S. P.; Hubmayr, J.; Koopman, B. J.; Li, D.; McMahon, J.; Nati, F.; Niemack, M. D.; Pappas, C. G.; Salatino, M.; Schmitt, B. L.; Simon, S. M.; Staggs, S. T.; Stevens, J. R.; Van Lanen, J.; Vavagiakis, E. M.; Ward, J. T.; Wollack, E. J.

2016-08-01

Advanced ACTPol (AdvACT) is a third-generation cosmic microwave background receiver to be deployed in 2016 on the Atacama Cosmology Telescope (ACT). Spanning five frequency bands from 25 to 280 GHz and having just over 5600 transition-edge sensor (TES) bolometers, this receiver will exhibit increased sensitivity and mapping speed compared to previously fielded ACT instruments. This paper presents the fabrication processes developed by NIST to scale to large arrays of feedhorn-coupled multichroic AlMn-based TES polarimeters on 150-mm diameter wafers. In addition to describing the streamlined fabrication process which enables high yields of densely packed detectors across larger wafers, we report the details of process improvements for sensor (AlMn) and insulator (SiN_x) materials and microwave structures, and the resulting performance improvements.

Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers

NASA Technical Reports Server (NTRS)

Duff, S. M.; Austermann, J.; Beall, J. A.; Becker, D.; Datta, R.; Gallardo, P. A.; Henderson, S. W.; Hilton, G. C.; Ho, S. P.; Hubmayr, J.;

Sensor devices comprising field-structured composites

DOEpatents

Martin, James E.; Hughes, Robert C.; Anderson, Robert A.

2001-02-27

A new class of sensor devices comprising field-structured conducting composites comprising a textured distribution of conducting magnetic particles is disclosed. The conducting properties of such field-structured materials can be precisely controlled during fabrication so as to exhibit a large change in electrical conductivity when subject to any environmental influence which changes the relative volume fraction. Influences which can be so detected include stress, strain, shear, temperature change, humidity, magnetic field, electromagnetic radiation, and the presence or absence of certain chemicals. This behavior can be made the basis for a wide variety of sensor devices.

3D printing of highly elastic strain sensors using polyurethane/multiwall carbon nanotube composites

NASA Astrophysics Data System (ADS)

Christ, Josef F.; Hohimer, Cameron J.; Aliheidari, Nahal; Ameli, Amir; Mo, Changki; Pötschke, Petra

2017-04-01

As the desire for wearable electronics increases and the soft robotics industry advances, the need for novel sensing materials has also increased. Recently, there have been many attempts at producing novel materials, which exhibit piezoresistive behavior. However, one of the major shortcomings in strain sensing technologies is in the fabrication of such sensors. While there is significant research and literature covering the various methods for developing piezoresistive materials, fabricating complex sensor platforms is still a manufacturing challenge. Here, we report a facile method to fabricate multidirectional embedded strain sensors using additive manufacturing technology. Pure thermoplastic polyurethane (TPU) and TPU/multiwall carbon nanotubes (MWCNT) nanocomposites were 3D printed in tandem using a low-cost multi-material FDM printer to fabricate uniaxial and biaxial strain sensors with conductive paths embedded within the insulative TPU platform. The sensors were then subjected to a series of cyclic strain loads. The results revealed excellent piezoresistive responses of the sensors with cyclic repeatability in both the axial and transverse directions and in response to strains as high as 50%. Further, while strain-softening did occur in the embedded printed strain sensors, it was predictable and similar to the results found in the literature for bulk polymer nanocomposites. This works demonstrates the possibility of manufacturing embedded and multidirectional flexible strain sensors using an inexpensive and versatile method, with potential applications in soft robotics and flexible electronics and health monitoring.

Silver nanowire/polymer composite soft conductive film fabricated by large-area compatible coating for flexible pressure sensor array

NASA Astrophysics Data System (ADS)

Chen, Sujie; Li, Siying; Peng, Sai; Huang, Yukun; Zhao, Jiaqing; Tang, Wei; Guo, Xiaojun

2018-01-01

Soft conductive films composed of a silver nanowire (AgNW) network, a neutral-pH PEDOT:PSS over-coating layer and a polydimethylsiloxane (PDMS) elastomer substrate are fabricated by large area compatible coating processes. The neutral-pH PEDOT:PSS layer is shown to be able to significantly improve the conductivity, stretchability and air stability of the conductive films. The soft conductive films are patterned using a simple maskless patterning approach to fabricate an 8 × 8 flexible pressure sensor array. It is shown that such soft conductive films can help to improve the sensitivity and reduce the signal crosstalk over the pressure sensor array. Project supported by the Science and Technology Commission of Shanghai Municipality (No. 16JC1400603).

Importance of network density of nanotube: Effect on nitrogen dioxide gas sensing by solid state resistive sensor

DOE Office of Scientific and Technical Information (OSTI.GOV)

Mishra, Prabhash; Grachyova, D. V.; Moskalenko, A. S.

2016-04-13

Dispersion of single-walled carbon nanotubes (SWCNTs) is an established fact, however, its effect on toxic gas sensing for the development of solid state resistive sensor was not well reported. In this report, the dispersion quality of SWCNTs has been investigated and improved, and this well-dispersed SWCNTs network was used for sensor fabrication to monitor nitrogen dioxide gas. Ultraviolet (UV)-visible spectroscopic studies shows the strength of SWNTs dispersion and scanning electron microscopy (SEM) imaging provides the morphological properties of the sensor device. In this gas sensor device, two sets of resistive type sensors were fabricated that consisting of a pair ofmore » interdigitated electrodes (IDEs) using dielectrophoresis technique with different SWCNTs network density. With low-density SWCNTs networks, this fabricated sensor exhibits a high response for nitrogen dioxide sensing. The sensing of nitrogen dioxide is mainly due to charge transfer from absorbed molecules to sidewalls of nanotube and tube-tube screening acting a major role for the transport properties of charge carriers.« less

Fabrication of highly sensitive and selective H₂ gas sensor based on SnO₂ thin film sensitized with microsized Pd islands.

PubMed

Nguyen, Van Toan; Nguyen, Viet Chien; Nguyen, Van Duy; Hoang, Si Hong; Hugo, Nguyen; Nguyen, Duc Hoa; Nguyen, Van Hieu

2016-01-15

Ultrasensitive and selective hydrogen gas sensor is vital component in safe use of hydrogen that requires a detection and alarm of leakage. Herein, we fabricated a H2 sensing devices by adopting a simple design of planar-type structure sensor in which the heater, electrode, and sensing layer were patterned on the front side of a silicon wafer. The SnO2 thin film-based sensors that were sensitized with microsized Pd islands were fabricated at a wafer-scale by using a sputtering system combined with micro-electronic techniques. The thicknesses of SnO2 thin film and microsized Pd islands were optimized to maximize the sensing performance of the devices. The optimized sensor could be used for monitoring hydrogen gas at low concentrations of 25-250 ppm, with a linear dependence to H2 concentration and a fast response and recovery time. The sensor also showed excellent selectivity for monitoring H2 among other gases, such as CO, NH3, and LPG, and satisfactory characteristics for ensuring safety in handling hydrogen. The hydrogen sensing characteristics of the sensors sensitized with Pt and Au islands were also studied to clarify the sensing mechanisms. Copyright © 2015 Elsevier B.V. All rights reserved.

A wearable strain sensor based on a carbonized nano-sponge/silicone composite for human motion detection.

PubMed

Yu, Xiao-Guang; Li, Yuan-Qing; Zhu, Wei-Bin; Huang, Pei; Wang, Tong-Tong; Hu, Ning; Fu, Shao-Yun

2017-05-25

Melamine sponge, also known as nano-sponge, is widely used as an abrasive cleaner in our daily life. In this work, the fabrication of a wearable strain sensor for human motion detection is first demonstrated with a commercially available nano-sponge as a starting material. The key resistance sensitive material in the wearable strain sensor is obtained by the encapsulation of a carbonized nano-sponge (CNS) with silicone resin. The as-fabricated CNS/silicone sensor is highly sensitive to strain with a maximum gauge factor of 18.42. In addition, the CNS/silicone sensor exhibits a fast and reliable response to various cyclic loading within a strain range of 0-15% and a loading frequency range of 0.01-1 Hz. Finally, the CNS/silicone sensor as a wearable device for human motion detection including joint motion, eye blinking, blood pulse and breathing is demonstrated by attaching the sensor to the corresponding parts of the human body. In consideration of the simple fabrication technique, low material cost and excellent strain sensing performance, the CNS/silicone sensor is believed to have great potential in the next-generation of wearable devices for human motion detection.

A Wireless Pressure Sensor Integrated with a Biodegradable Polymer Stent for Biomedical Applications

PubMed Central

Park, Jongsung; Kim, Ji-Kwan; Patil, Swati J.; Park, Jun-Kyu; Park, SuA; Lee, Dong-Weon

2016-01-01

This paper describes the fabrication and characterization of a wireless pressure sensor for smart stent applications. The micromachined pressure sensor has an area of 3.13 × 3.16 mm2 and is fabricated with a photosensitive SU-8 polymer. The wireless pressure sensor comprises a resonant circuit and can be used without the use of an internal power source. The capacitance variations caused by changes in the intravascular pressure shift the resonance frequency of the sensor. This change can be detected using an external antenna, thus enabling the measurement of the pressure changes inside a tube with a simple external circuit. The wireless pressure sensor is capable of measuring pressure from 0 mmHg to 230 mmHg, with a sensitivity of 0.043 MHz/mmHg. The biocompatibility of the pressure sensor was evaluated using cardiac cells isolated from neonatal rat ventricular myocytes. After inserting a metal stent integrated with the pressure sensor into a cardiovascular vessel of an animal, medical systems such as X-ray were employed to consistently monitor the condition of the blood vessel. No abnormality was found in the animal blood vessel for approximately one month. Furthermore, a biodegradable polymer (polycaprolactone) stent was fabricated with a 3D printer. The polymer stent exhibits better sensitivity degradation of the pressure sensor compared to the metal stent. PMID:27271619

A Wireless Pressure Sensor Integrated with a Biodegradable Polymer Stent for Biomedical Applications.

PubMed

Park, Jongsung; Kim, Ji-Kwan; Patil, Swati J; Park, Jun-Kyu; Park, SuA; Lee, Dong-Weon

2016-06-02

This paper describes the fabrication and characterization of a wireless pressure sensor for smart stent applications. The micromachined pressure sensor has an area of 3.13 × 3.16 mm² and is fabricated with a photosensitive SU-8 polymer. The wireless pressure sensor comprises a resonant circuit and can be used without the use of an internal power source. The capacitance variations caused by changes in the intravascular pressure shift the resonance frequency of the sensor. This change can be detected using an external antenna, thus enabling the measurement of the pressure changes inside a tube with a simple external circuit. The wireless pressure sensor is capable of measuring pressure from 0 mmHg to 230 mmHg, with a sensitivity of 0.043 MHz/mmHg. The biocompatibility of the pressure sensor was evaluated using cardiac cells isolated from neonatal rat ventricular myocytes. After inserting a metal stent integrated with the pressure sensor into a cardiovascular vessel of an animal, medical systems such as X-ray were employed to consistently monitor the condition of the blood vessel. No abnormality was found in the animal blood vessel for approximately one month. Furthermore, a biodegradable polymer (polycaprolactone) stent was fabricated with a 3D printer. The polymer stent exhibits better sensitivity degradation of the pressure sensor compared to the metal stent.

Dynamometer Testing of Planar Mixed-Potential Sensors

DOE PAGES

Kreller, C. R.; Sekhar, P. K.; Prikhodko, V.; ...

2014-09-22

Mixed-potential sensors for vehicle on-board emissions monitoring applications have been fabricated in an automotive planar sensor configuration using high temperature ceramic co-fire methods. The sensing element consists of dense Pt and LaSrCrO electrodes and a porous 3 mol% YSZ electrolyte. This sensor construct exhibits preferential selectivity to NO x (NO+NO 2) when operated at a positive current bias. The performance of the planar sensors under engine-out conditions was recently evaluated at the Oak Ridge National Laboratory National Transportation Research Center on a GM 1.9L CIDI diesel engine. The sensor response qualitatively tracked transients in NO x measured via FTIR undermore » transient engine operation. Additionally, quantitative correlation between sensor voltage response and total NO x concentration was obtained under steady-state engine speed and load while varying exhaust gas recirculation (EGR) levels.« less

A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology

NASA Astrophysics Data System (ADS)

Yi, Zhenxiang; Liao, Xiaoping

2013-03-01

In this paper, a novel capacitive power sensor based on the microelectromechanical systems (MEMS) cantilever beam at 8-12 GHz is proposed, fabricated and tested. The presented design can not only realize a cantilever beam instead of the conventional fixed-fixed beam, but also provide fine compatibility with the GaAs monolithic microwave integrated circuit (MMIC) process. When the displacement of the cantilever beam is very small compared with the initial height of the air gap, the capacitance change between the measuring electrode and the cantilever beam has an approximately linear dependence on the incident radio frequency (RF) power. Impedance compensating technology, by modifying the slot width of the coplanar waveguide transmission line, is adopted to minimize the effect of the cantilever beam on the power sensor; its validity is verified by the simulation of high frequency structure simulator software. The power sensor has been fabricated successfully by Au surface micromachining using polyimide as the sacrificial layer on the GaAs substrate. Optimization of the design with impedance compensating technology has resulted in a measured return loss of less than -25 dB and an insertion loss of around 0.1 dB at 8-12 GHz, which shows the slight effect of the cantilever beam on the microwave performance of this power sensor. The measured capacitance change starts from 0.7 fF to 1.3 fF when the incident RF power increases from 100 to 200 mW and an approximate linear dependence has been obtained. The measured sensitivities of the sensor are about 6.16, 6.27 and 6.03 aF mW-1 at 8, 10 and 12 GHz, respectively.

Sensing Properties of a Novel Temperature Sensor Based on Field Assisted Thermal Emission.

PubMed

Pan, Zhigang; Zhang, Yong; Cheng, Zhenzhen; Tong, Jiaming; Chen, Qiyu; Zhang, Jianpeng; Zhang, Jiaxiang; Li, Xin; Li, Yunjia

2017-02-27

The existing temperature sensors using carbon nanotubes (CNTs) are limited by low sensitivity, complicated processes, or dependence on microscopy to observe the experimental results. Here we report the fabrication and successful testing of an ionization temperature sensor featuring non-self-sustaining discharge. The sharp tips of nanotubes generate high electric fields at relatively low voltages, lowering the work function of electrons emitted by CNTs, and thereby enabling the safe operation of such sensors. Due to the temperature effect on the electron emission of CNTs, the collecting current exhibited an exponential increase with temperature rising from 20 °C to 100 °C. Additionally, a higher temperature coefficient of 0.04 K -1 was obtained at 24 V voltage applied on the extracting electrode, higher than the values of other reported CNT-based temperature sensors. The triple-electrode ionization temperature sensor is easy to fabricate and converts the temperature change directly into an electrical signal. It shows a high temperature coefficient and good application potential.

Sensing Properties of a Novel Temperature Sensor Based on Field Assisted Thermal Emission

PubMed Central

Pan, Zhigang; Zhang, Yong; Cheng, Zhenzhen; Tong, Jiaming; Chen, Qiyu; Zhang, Jianpeng; Zhang, Jiaxiang; Li, Xin; Li, Yunjia

2017-01-01

The existing temperature sensors using carbon nanotubes (CNTs) are limited by low sensitivity, complicated processes, or dependence on microscopy to observe the experimental results. Here we report the fabrication and successful testing of an ionization temperature sensor featuring non-self-sustaining discharge. The sharp tips of nanotubes generate high electric fields at relatively low voltages, lowering the work function of electrons emitted by CNTs, and thereby enabling the safe operation of such sensors. Due to the temperature effect on the electron emission of CNTs, the collecting current exhibited an exponential increase with temperature rising from 20 °C to 100 °C. Additionally, a higher temperature coefficient of 0.04 K−1 was obtained at 24 V voltage applied on the extracting electrode, higher than the values of other reported CNT-based temperature sensors. The triple-electrode ionization temperature sensor is easy to fabricate and converts the temperature change directly into an electrical signal. It shows a high temperature coefficient and good application potential. PMID:28264427

Fabrication of Amperometric Glucose Sensor Using Glucose Oxidase-Cellulose Nanofiber Aqueous Solution.

PubMed

Yasuzawa, Mikito; Omura, Yuya; Hiura, Kentaro; Li, Jiang; Fuchiwaki, Yusuke; Tanaka, Masato

2015-01-01

Cellulose nanofiber aqueous solution, which remained virtually transparent for more than one week, was prepared by using the clear upper layer of diluted cellulose nanofiber solution produced by wet jet milling. Glucose oxidase (GOx) was easily dissolved in this solution and GOx-immobilized electrode was easily fabricated by simple repetitious drops of GOx-cellulose solution on the surface of a platinum-iridium electrode. Glucose sensor properties of the obtained electrodes were examined in phosphate buffer solution of pH 7.4 at 40°C. The obtained electrode provided a glucose sensor response with significantly high response speed and good linear relationship between glucose concentration and response current. After an initial decrease of response sensitivity for a few days, relatively constant sensitivity was obtained for about 20 days. Nevertheless, the influence of electroactive compounds such as ascorbic acid, uric acid and acetoaminophen were not negletable.

Recent Advances in the Fabrication and Application of Screen-Printed Electrochemical (Bio)Sensors Based on Carbon Materials for Biomedical, Agri-Food and Environmental Analyses

PubMed Central

Hughes, Gareth; Westmacott, Kelly; Honeychurch, Kevin C.; Crew, Adrian; Pemberton, Roy M.; Hart, John P.

2016-01-01

This review describes recent advances in the fabrication of electrochemical (bio)sensors based on screen-printing technology involving carbon materials and their application in biomedical, agri-food and environmental analyses. It will focus on the various strategies employed in the fabrication of screen-printed (bio)sensors, together with their performance characteristics; the application of these devices for the measurement of selected naturally occurring biomolecules, environmental pollutants and toxins will be discussed. PMID:27690118

Fabrication of Fe–Co Magnetostrictive Fiber Reinforced Plastic Composites and Their Sensor Performance Evaluation

PubMed Central

Katabira, Kenichi; Yoshida, Yu; Masuda, Atsuji; Watanabe, Akihito; Narita, Fumio

2018-01-01

The inverse magnetostrictive effect is an effective property for energy harvesting; the material needs to have large magnetostriction and ease of mass production. Fe–Co alloys being magnetostrictive materials have favorable characteristics which are high strength, ductility, and excellent workability, allowing easy fabrication of Fe–Co alloy fibers. In this study, we fabricated magnetostrictive polymer composites, in which Fe–Co fibers were woven into polyester fabric, and discussed their sensor performance. Compression and bending tests were carried out to measure the magnetic flux density change, and the effects of magnetization, bias magnetic field, and the location of the fibers on the performance were discussed. It was shown that magnetic flux density change due to compression and bending is related to the magnetization of the Fe–Co fiber and the bias magnetic field. The magnetic flux density change of Fe–Co fiber reinforced plastics was larger than that of the plastics with Terfenol-D particles. PMID:29522455

Fabrication of optical fiber sensor based on double-layer SU-8 diaphragm and the partial discharge detection

NASA Astrophysics Data System (ADS)

Shang, Ya-na; Ni, Qing-yan; Ding, Ding; Chen, Na; Wang, Ting-yun

2015-01-01

In this paper, a partial discharge detection system is proposed using an optical fiber Fabry-Perot (FP) interferometric sensor, which is fabricated by photolithography. SU-8 photoresist is employed due to its low Young's modulus and potentially high sensitivity for ultrasound detection. The FP cavity is formed by coating the fiber end face with two layers of SU-8 so that the cavity can be controlled by the thickness of the middle layer of SU-8. Static pressure measurement experiments are done to estimate the sensing performance. The results show that the SU-8 based sensor has a sensitivity of 154.8 nm/kPa, which is much higher than that of silica based sensor under the same condition. Moreover, the sensor is demonstrated successfully to detect ultrasound from electrode discharge.

Polyaniline-ZnO nanocomposites as ethanol gas sensors

NASA Astrophysics Data System (ADS)

Talegaonkar, Janhavi; Patil, Y. B.; Patil, D. R.

2018-05-01

Polyaniline and it`s nanocomposites with ZnO were successfully synthesized by photo-induced polymerization method with various concentrations of ZnO, followed by characterizations viz. SEM, EDAX, XRD, FTIR and UV-Vis. Thick films of synthesized powders were fabricated by screen printing technique for monitoring various gases at different operating temperatures and at various gas concentrations. CuO activated polyaniline-ZnO nano-composite exhibits maximum response of ethanol gas at room temperature. The sensor exhibits high sensitivity, highest selectivity, quick response, fast recovery, long term stability, etc. An exceptional sensitivity was found to low concentrations of ethanol gas at room temperature and no cross sensitivity was observed even to high concentrations of other hazardous and polluting gases. The efforts have been made to develop the ethanol sensor based on PANI and its nanocomposites. The effects of microstructure and surfactant concentration on the ethanol response, selectivity, response and recovery of the sensor in the presence of ethanol gas were studied and discussed.

Carbon nanotube-sensor-integrated microfluidic platform for real-time chemical concentration detection.

PubMed

Yang, Li; Li, Minglin; Qu, Yanli; Dong, Zaili; Li, Wen J

2009-09-01

This paper presents the development of a chemical sensor employing electronic-grade carbon nanotubes (EG-CNTs) as the active sensing element for sodium hypochlorite detection. The sensor, integrated in a PDMS-glass microfluidic chamber, was fabricated by bulk aligning of EG-CNTs between gold microelectrode pairs using dielectrophoretic technique. Upon exposure to sodium hypochlorite solution, the characteristics of the carbon nanotube chemical sensor were investigated at room temperature under constant current mode. The sensor exhibited responsivity, which fits a linear logarithmic dependence on concentration in the range of 1/32 to 8 ppm, a detection limit lower than 5 ppb, while saturating at 16 ppm. The typical response time of the sensor at room temperature is on the order of minutes and the recovery time is a few hours. In particular, the sensor showed an obvious sensitivity to the volume of detected solution. It was found that the activation power of the sensor was extremely low, i.e. in the range of nanowatts. These results indicate great potential of EG-CNT for advanced nanosensors with superior sensitivity, ultra-low power consumption, and less fabrication complexity.

Piezoelectric Active Humidity Sensors Based on Lead-Free NaNbO₃ Piezoelectric Nanofibers.

PubMed

Gu, Li; Zhou, Di; Cao, Jun Cheng

2016-06-07

The development of micro-/nano-scaled energy harvesters and the self-powered sensor system has attracted great attention due to the miniaturization and integration of the micro-device. In this work, lead-free NaNbO₃ piezoelectric nanofibers with a monoclinic perovskite structure were synthesized by the far-field electrospinning method. The flexible active humidity sensors were fabricated by transferring the nanofibers from silicon to a soft polymer substrate. The sensors exhibited outstanding piezoelectric energy-harvesting performance with output voltage up to 2 V during the vibration process. The output voltage generated by the NaNbO₃ sensors exhibited a negative correlation with the environmental humidity varying from 5% to 80%, where the peak-to-peak value of the output voltage generated by the sensors decreased from 0.40 to 0.07 V. The sensor also exhibited a short response time, good selectively against ethanol steam, and great temperature stability. The piezoelectric active humidity sensing property could be attributed to the increased leakage current in the NaNbO₃ nanofibers, which was generated due to proton hopping among the H₃O⁺ groups in the absorbed H₂O layers under the driving force of the piezoelectric potential.

Batch fabrication of polymer microfluidic cartridges for QCM sensor packaging by direct bonding

NASA Astrophysics Data System (ADS)

Sandström, Niklas; Zandi Shafagh, Reza; Gylfason, Kristinn B.; Haraldsson, Tommy; van der Wijngaart, Wouter

2017-12-01

Quartz crystal microbalance (QCM) sensing is an established technique commonly used in laboratory based life-science applications. However, the relatively complex, multi-part design and multi-step fabrication and assembly of state-of-the-art QCM cartridges make them unsuited for disposable applications such as point-of-care (PoC) diagnostics. In this work, we present the uncomplicated manufacturing of QCMs in polymer microfluidic cartridges. Our novel approach comprises two key innovations: the batch reaction injection molding of microfluidic parts; and the integration of the cartridge components by direct, unassisted bonding. We demonstrate molding of batches of 12 off-stoichiometry thiol-ene epoxy polymer (OSTE+) polymer parts in a single molding cycle using an adapted reaction injection molding process; and the direct bonding of the OSTE+  parts to other OSTE+  substrates, to printed circuit boards, and to QCMs. The microfluidic QCM OSTE+  cartridges were successfully evaluated in terms of liquid sealing as well as electrical properties, and the sensor performance characteristics are on par with those of a commercially available QCM biosensor cartridge. The simplified manufacturing of QCM sensors with maintained performance potentializes novel application areas, e.g. as disposable devices in a point of care setting. Moreover, our results can be extended to simplifying the fabrication of other microfluidic devices with multiple heterogeneously integrated components.

Field effect sensors for PCR applications

NASA Astrophysics Data System (ADS)

Taing, Meng-Houit; Sweatman, Denis R.

2004-03-01

The use of field effect sensors for biological and chemical sensing is widely employed due to its ability to make detections based on charge and surface potential. Because proteins and DNA almost always carry a charge [1], silicon can be used to micro fabricate such a sensor. The EIS structure (Electrolyte on Insulator on Silicon) provides a novel, label-free and simple to fabricate way to make a field effect DNA detection sensor. The sensor responds to fluctuating capacitance caused by a depletion layer thickness change at the surface of the silicon substrate through DNA adsorption onto the dielectric oxide/PLL (Poly-L-Lysine) surface. As DNA molecules diffuse to the sensor surface, they are bound to their complimentary capture probes deposited on the surface. The negative charge exhibited by the DNA forces negative charge carriers in the substrate to move away from the surface. This causes an n-type depletion layer substrate to thicken and a p-type to thin. The depletion layer thickness can be measured by its capacitance using an LCR meter. This experiment is conducted using the ConVolt (constant voltage) approach. Nucleic acids are amplified by an on chip PCR (Polymerase Chain Reaction) system and then fed into the sensor. The low ionic solution strength will ensure that counter-ions do not affect the sensor measurements. The sensor surface contains capture probes that bind to the pathogen. The types of pathogens we"ll be detecting include salmonella, campylobacter and E.Coli DNA. They are held onto the sensor surface by the positively charged Poly-L-Lysine layer. The electrolyte is biased through a pseudo-reference electrode. Pseudo reference electrodes are usually made from metals such as Platinum or Silver. The problem associated with "floating" biasing electrodes is they cannot provide stable biasing potentials [2]. They drift due to surface charging effects and trapped charges on the surface. To eliminate this, a differential system consisting of 2 sensors

Formaldehyde gas sensor based on TiO2 thin membrane integrated with nano silicon structure

NASA Astrophysics Data System (ADS)

Zheng, Xuan; Ming, An-jie; Ye, Li; Chen, Feng-hua; Sun, Xi-long; Liu, Wei-bing; Li, Chao-bo; Ou, Wen; Wang, Wei-bing; Chen, Da-peng

2016-07-01

An innovative formaldehyde gas sensor based on thin membrane type metal oxide of TiO2 layer was designed and fabricated. This sensor under ultraviolet (UV) light emitting diode (LED) illumination exhibits a higher response to formaldehyde than that without UV illumination at low temperature. The sensitivities of the sensor under steady working condition were calculated for different gas concentrations. The sensitivity to formaldehyde of 7.14 mg/m3 is about 15.91 under UV illumination with response time of 580 s and recovery time of 500 s. The device was fabricated through micro-electro-mechanical system (MEMS) processing technology. First, plasma immersion ion implantation (PIII) was adopted to form black polysilicon, then a nanoscale TiO2 membrane with thickness of 53 nm was deposited by DC reactive magnetron sputtering to obtain the sensing layer. By such fabrication approaches, the nanoscale polysilicon presents continuous rough surface with thickness of 50 nm, which could improve the porosity of the sensing membrane. The fabrication process can be mass-produced for the MEMS process compatibility.

Patterned, highly stretchable and conductive nanofibrous PANI/PVDF strain sensors based on electrospinning and in situ polymerization

NASA Astrophysics Data System (ADS)

Yu, Gui-Feng; Yan, Xu; Yu, Miao; Jia, Meng-Yang; Pan, Wei; He, Xiao-Xiao; Han, Wen-Peng; Zhang, Zhi-Ming; Yu, Liang-Min; Long, Yun-Ze

2016-01-01

A facile fabrication strategy via electrospinning and followed by in situ polymerization to fabricate a patterned, highly stretchable, and conductive polyaniline/poly(vinylidene fluoride) (PANI/PVDF) nanofibrous membrane is reported. Owing to the patterned structure, the nanofibrous PANI/PVDF strain sensor can detect a strain up to 110%, for comparison, which is 2.6 times higher than the common nonwoven PANI/PVDF mat and much larger than the previously reported values (usually less than 15%). Meanwhile, the conductivity of the patterned strain sensor shows a linear response to the applied strain in a wide range from 0% to about 85%. Additionally, the patterned PANI/PVDF strain sensor can completely recover to its original electrical and mechanical values within a strain range of more than 22%, and exhibits good durability over 10 000 folding-unfolding tests. Furthermore, the strain sensor also can be used to detect finger motion. The results demonstrate promising application of the patterned nanofibrous membrane in flexible electronic fields.A facile fabrication strategy via electrospinning and followed by in situ polymerization to fabricate a patterned, highly stretchable, and conductive polyaniline/poly(vinylidene fluoride) (PANI/PVDF) nanofibrous membrane is reported. Owing to the patterned structure, the nanofibrous PANI/PVDF strain sensor can detect a strain up to 110%, for comparison, which is 2.6 times higher than the common nonwoven PANI/PVDF mat and much larger than the previously reported values (usually less than 15%). Meanwhile, the conductivity of the patterned strain sensor shows a linear response to the applied strain in a wide range from 0% to about 85%. Additionally, the patterned PANI/PVDF strain sensor can completely recover to its original electrical and mechanical values within a strain range of more than 22%, and exhibits good durability over 10 000 folding-unfolding tests. Furthermore, the strain sensor also can be used to detect finger

Flexible and transparent strain sensors based on super-aligned carbon nanotube films.

PubMed

Yu, Yang; Luo, Yufeng; Guo, Alexander; Yan, Lingjia; Wu, Yang; Jiang, Kaili; Li, Qunqing; Fan, Shoushan; Wang, Jiaping

2017-05-25

Highly flexible and transparent strain sensors are fabricated by directly coating super-aligned carbon nanotube (SACNT) films on polydimethylsiloxane (PDMS) substrates. The fabrication process is simple, low cost, and favorable for industrial scalability. The SACNT/PDMS strain sensors present a high sensing range of 400%, a fast response of less than 98 ms, and a low creep of 4% at 400% strain. The SACNT/PDMS strain sensors can withstand 5000 stretching-releasing cycles at 400% strain. Moreover, the SACNT/PDMS strain sensors are transparent with 80% transmittance at 550 nm. In situ microscopic observation clarifies that the surface morphology of the SACNT film exhibits a reversible change during the stretching and releasing processes and thus its electrical conductance is able to fully recover to the original value after the loading-unloading cycles. The SACNT/PDMS strain sensors have the advantages of a wide sensing range, fast response, low creep, transparency, and excellent durability, and thus show great potential in wearable devices to monitor fast and large-scale movements without affecting the appearance of the devices.

On the Fabrication and Behavior of Diamond Microelectromechanical Sensors (DMEMS)

NASA Technical Reports Server (NTRS)

Holmes, K.; Davidson, J. L.; Kang, W. P.; Howell, M.

2001-01-01

CVD (chemically vapor deposited) diamond films can be processed similar to "conventional" semiconductor device fabrication and as such can be used to achieve microelectromechanical structures (MEMS) also similar to, for example, silicon technology. Very small cantilever beams, membranes, stripes, tips, etc. can be constructed in doped and undoped diamond films and offer an array of choices in diamond with its known superior properties such as elastic modulus, high temperature semiconduction, high thermal conductivity, very low coefficient of expansion and numerous other diamond parameters. This paper will review the construction and behavior of the second generation DMEMS devices comprised as an accelerometer with a diamond diaphragm for use in very high G applications and a diamond pressure sensor for very high temperature and frequency response.

Polymeric cantilever integrated with PDMS/graphene composite strain sensor.

PubMed

Choi, Young-Soo; Gwak, Min-Joo; Lee, Dong-Weon

2016-10-01

This paper describes the mechanical and electrical characteristics of a polydimethylsiloxane (PDMS) cantilever integrated with a high-sensitivity strain sensor. The strain sensor is fabricated using PDMS and graphene flakes that are uniformly distributed in the PDMS. In order to prepare PDMS/graphene composite with uniform resistance, a tetrahydrofuran solution is used to decrease the viscosity of a PDMS base polymer solution. A horn-type sonicator is then used to mix the base polymer with graphene flakes. Low viscosity of the base polymer solution improves the reliability and reproducibility of the PDMS/graphene composite for strain sensor applications. After dicing the composite into the desired sensor shape, a tensile test is performed. The experimental results show that the composite with a concentration of 30 wt.% exhibits a linear response up to a strain rate of 9%. The graphene concentration of the prepared materials affects the gauge factor, which at 20% graphene concentration reaches about 50, and with increasing graphene concentration to 30% decreases to 9. Furthermore, photolithography, PDMS casting, and a stencil process are used to fabricate a PDMS cantilever with an integrated strain sensor. The change in resistance of the integrated PDMS/graphene sensor is characterized with respect to the displacement of the cantilever of within 500 μm. The experimental results confirmed that the prepared PDMS/graphene based sensor has the potential for high-sensitive biosensor applications.

Highly selective dopamine electrochemical sensor based on electrochemically pretreated graphite and nafion composite modified screen printed carbon electrode.

PubMed

Ku, Shuhao; Palanisamy, Selvakumar; Chen, Shen-Ming

2013-12-01

Herein, we report a highly selective dopamine electrochemical sensor based on electrochemically pretreated graphite/nafion composite modified screen printed carbon (SPC) electrode. Electrochemically activated graphite/nafion composite was prepared by using a simple electrochemical method. Scanning electron microscope (SEM) used to characterize the surface morphology of the fabricated composite electrode. The SEM result clearly indicates that the graphitic basal planes were totally disturbed and leads to the formation of graphite nanosheets. The composite modified electrode showed an enhanced electrocatalytic activity toward the oxidation of DA when compared with either electrochemical pretreated graphite or nafion SPC electrodes. The fabricated composite electrode exhibits a good electrocatalytic oxidation toward DA in the linear response range from 0.5 to 70 μM with the detection limit of 0.023 μM. The proposed sensor also exhibits very good selectivity and stability, with the appreciable sensitivity. In addition, the proposed sensor showed satisfactory recovery results toward the commercial pharmaceutical DA samples. Copyright © 2013 Elsevier Inc. All rights reserved.

Zinc phthalocyanine nanowires based flexible sensor for room temperature Cl2 detection

NASA Astrophysics Data System (ADS)

Devi, Pooja; Saini, Rajan; Singh, Rajinder; Mahajan, A.; Bedi, R. K.; Aswal, D. K.; Debnath, A. K.

2018-04-01

We have fabricated highly sensitive and Cl2 selective flexible sensor by depositing solution processed zinc phthalocyanine nanowires onto the flexible PET substrate and studied its Cl2 sensing characteristics in Cl2 concentration range 5-1500 ppb. The flexible sensor has a minimum detection limit as low as 5 ppb of Cl2 and response as high as 550% within 10 seconds. Interestingly, the sensor exhibited enhanced and faster response kinetics under bending conditions. The gas sensing mechanism of sensor has been discussed on the basis of XPS and Raman spectroscopic studies which revealed that zinc ions were the preferred sites for Cl2 interactions.

Genetically-encoded fluorescent voltage sensors using the voltage-sensing domain of Nematostella and Danio phosphatases exhibit fast kinetics

PubMed Central

Baker, Bradley J.; Jin, Lei; Han, Zhou; Cohen, Lawrence B.; Popovic, Marko; Platisa, Jelena; Pieribone, Vincent

2012-01-01

A substantial increase in the speed of the optical response of genetically-encoded Fluorescent Protein voltage sensors (FP voltage sensors) was achieved by using the voltage-sensing phosphatase genes of Nematostella vectensis and Danio rerio. A potential N. vectensis voltage-sensing phosphatase was identified in silico. The voltage-sensing domain (S1–S4) of the N. vectensis homolog was used to create an FP voltage sensor called Nema. By replacing the phosphatase with a cerulean/citrine FRET pair, a new FP voltage sensor was synthesized with fast off kinetics (Tauoff <5 msec). However, the signal was small (ΔF/F= 0.6%/200 mV). FP voltage sensors using the D. rerio voltage-sensing phosphatase homolog, designated Zahra and Zahra 2, exhibited fast on and off kinetics within 2 msec of the time constants observed with the organic voltage-sensitive dye, di4-ANEPPS. Mutagenesis of the S4 region of the Danio FP voltage sensor shifted the voltage dependence to more negative potentials but did not noticeably affect the kinetics of the optical signal. PMID:22634212

Electrochemical sensor for rutin detection based on Au nanoparticle-loaded helical carbon nanotubes

NASA Astrophysics Data System (ADS)

Yang, Haitang; Li, Bingyue; Cui, Rongjing; Xing, Ruimin; Liu, Shanhu

2017-10-01

The key step in the fabrication of highly active electrochemical sensors is seeking multifunctional nanocomposites as electrode modified materials. In this study, the gold nanoparticle-decorated helical carbon nanotube nanocomposites (AuNPs-HCNTs) were fabricated for rutin detection because of its superior sensitivity, the chemical stability of AuNPs, and the superior conductivity and unique 3D-helical structure of helical carbon nanotubes. Results showed the prepared nanocomposites exhibited superior electrocatalytic activity towards rutin due to the synergetic effects of AuNPs and HCNTs. Under the optimized conditions, the developed sensor exhibited a linear response range from 0.1 to 31 μmol/L for rutin with a low detectable limit of 81 nmol/L. The proposed method might offer a possibility for electrochemical analysis of rutin in Chinese medical analysis or serum monitoring owing to its low cost, simplicity, high sensitivity, good stability, and few interferences against common coexisting ions in real samples.

Highly Sensitive Multifilament Fiber Strain Sensors with Ultrabroad Sensing Range for Textile Electronics.

PubMed

Lee, Jaehong; Shin, Sera; Lee, Sanggeun; Song, Jaekang; Kang, Subin; Han, Heetak; Kim, SeulGee; Kim, Seunghoe; Seo, Jungmok; Kim, DaeEun; Lee, Taeyoon

2018-05-22

Highly stretchable fiber strain sensors are one of the most important components for various applications in wearable electronics, electronic textiles, and biomedical electronics. Herein, we present a facile approach for fabricating highly stretchable and sensitive fiber strain sensors by embedding Ag nanoparticles into a stretchable fiber with a multifilament structure. The multifilament structure and Ag-rich shells of the fiber strain sensor enable the sensor to simultaneously achieve both a high sensitivity and largely wide sensing range despite its simple fabrication process and components. The fiber strain sensor simultaneously exhibits ultrahigh gauge factors (∼9.3 × 10 5 and ∼659 in the first stretching and subsequent stretching, respectively), a very broad strain-sensing range (450 and 200% for the first and subsequent stretching, respectively), and high durability for more than 10 000 stretching cycles. The fiber strain sensors can also be readily integrated into a glove to control a hand robot and effectively applied to monitor the large volume expansion of a balloon and a pig bladder for an artificial bladder system, thereby demonstrating the potential of the fiber strain sensors as candidates for electronic textiles, wearable electronics, and biomedical engineering.

Fabrication of a Horizontal and a Vertical Large Surface Area Nanogap Electrochemical Sensor

PubMed Central

Hammond, Jules L.; Rosamond, Mark C.; Sivaraya, Siva; Marken, Frank; Estrela, Pedro

2016-01-01

Nanogap sensors have a wide range of applications as they can provide accurate direct detection of biomolecules through impedimetric or amperometric signals. Signal response from nanogap sensors is dependent on both the electrode spacing and surface area. However, creating large surface area nanogap sensors presents several challenges during fabrication. We show two different approaches to achieve both horizontal and vertical coplanar nanogap geometries. In the first method we use electron-beam lithography (EBL) to pattern an 11 mm long serpentine nanogap (215 nm) between two electrodes. For the second method we use inductively-coupled plasma (ICP) reactive ion etching (RIE) to create a channel in a silicon substrate, optically pattern a buried 1.0 mm × 1.5 mm electrode before anodically bonding a second identical electrode, patterned on glass, directly above. The devices have a wide range of applicability in different sensing techniques with the large area nanogaps presenting advantages over other devices of the same family. As a case study we explore the detection of peptide nucleic acid (PNA)−DNA binding events using dielectric spectroscopy with the horizontal coplanar device. PMID:27983655

Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS)

PubMed Central

Tian, Bian; Zhao, Yulong; Jiang, Zhuangde; Zhang, Ling; Liao, Nansheng; Liu, Yuanhao; Meng, Chao

2009-01-01

In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the ANSYS software, a model of the structure was established. The fabrication on a single silicon substrate utilizes the technologies of anisotropic chemical etching and packaging through glass anodic bonding. The performance of this type of piezoresistive sensor, including size, sensitivity, and long-term stability, were investigated. The results indicate that the accuracy is 0.5% FS, therefore this design meets the requirements for a TPMS, and not only has a smaller size and simplicity of preparation, but also has high sensitivity and accuracy. PMID:22573960

Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS).

PubMed

Tian, Bian; Zhao, Yulong; Jiang, Zhuangde; Zhang, Ling; Liao, Nansheng; Liu, Yuanhao; Meng, Chao

2009-01-01

In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the ANSYS software, a model of the structure was established. The fabrication on a single silicon substrate utilizes the technologies of anisotropic chemical etching and packaging through glass anodic bonding. The performance of this type of piezoresistive sensor, including size, sensitivity, and long-term stability, were investigated. The results indicate that the accuracy is 0.5% FS, therefore this design meets the requirements for a TPMS, and not only has a smaller size and simplicity of preparation, but also has high sensitivity and accuracy.

Fabrication of optical chemical ammonia sensors using anodized alumina supports and sol-gel method.

PubMed

Markovics, Akos; Kovács, Barna

2013-05-15

In this comparative study, the fabrication and the sensing properties of various reflectometric optical ammonia gas sensors are described. In the first set of experiments the role of the support material was investigated on four different sensor membranes. Two of them were prepared by the adsorption of bromocresol green indicator on anodized aluminum plates. The applied anodizing voltages were 12 V and 24 V, which resulted in different dynamic ranges and response times for gaseous ammonia. The sol-gel method was used for the preparation of the other batch of sensors. These layers were coated on anodized aluminum plates (24 V) and on standard microscope cover glasses. In spite of the identical sensing chemistry, slightly different response times were measured merely because of the aluminum surface porosity. Gas molecules can remain entrapped in the pores, which results in delayed recovery time. On the other hand, the porous oxide film provides excellent adhesion, making the anodized aluminum an attractive support for the sol-gel layer. Copyright © 2013 Elsevier B.V. All rights reserved.

Fabrication of flexible MoS2 thin-film transistor arrays for practical gas-sensing applications.

PubMed

He, Qiyuan; Zeng, Zhiyuan; Yin, Zongyou; Li, Hai; Wu, Shixin; Huang, Xiao; Zhang, Hua

2012-10-08

By combining two kinds of solution-processable two-dimensional materials, a flexible transistor array is fabricated in which MoS(2) thin film is used as the active channel and reduced graphene oxide (rGO) film is used as the drain and source electrodes. The simple device configuration and the 1.5 mm-long MoS(2) channel ensure highly reproducible device fabrication and operation. This flexible transistor array can be used as a highly sensitive gas sensor with excellent reproducibility. Compared to using rGO thin film as the active channel, this new gas sensor exhibits much higher sensitivity. Moreover, functionalization of the MoS(2) thin film with Pt nanoparticles further increases the sensitivity by up to ∼3 times. The successful incorporation of a MoS(2) thin-film into the electronic sensor promises its potential application in various electronic devices. Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Advanced Fibre Bragg Grating and Microfibre Bragg Grating Fabrication Techniques

NASA Astrophysics Data System (ADS)

Chung, Kit Man

Fibre Bragg gratings (FBGs) have become a very important technology for communication systems and fibre optic sensing. Typically, FBGs are less than 10-mm long and are fabricated using fused silica uniform phase masks which become more expensive for longer length or non-uniform pitch. Generally, interference UV laser beams are employed to make long or complex FBGs, and this technique introduces critical precision and control issues. In this work, we demonstrate an advanced FBG fabrication system that enables the writing of long and complex gratings in optical fibres with virtually any apodisation profile, local phase and Bragg wavelength using a novel optical design in which the incident angles of two UV beams onto an optical fibre can be adjusted simultaneously by moving just one optical component, instead of two optics employed in earlier configurations, to vary the grating pitch. The key advantage of the grating fabrication system is that complex gratings can be fabricated by controlling the linear movements of two translation stages. In addition to the study of advanced grating fabrication technique, we also focus on the inscription of FBGs written in optical fibres with a cladding diameter of several ten's of microns. Fabrication of microfibres was investigated using a sophisticated tapering method. We also proposed a simple but practical technique to filter out the higher order modes reflected from the FBG written in microfibres via a linear taper region while the fundamental mode re-couples to the core. By using this technique, reflection from the microfibre Bragg grating (MFBG) can be effectively single mode, simplifying the demultiplexing and demodulation processes. MFBG exhibits high sensitivity to contact force and an MFBG-based force sensor was also constructed and tested to investigate their suitability for use as an invasive surgery device. Performance of the contact force sensor packaged in a conforming elastomer material compares favourably to one

Fabrication of gas sensor based on field ionization from SWCNTs with tripolar microelectrode

NASA Astrophysics Data System (ADS)

Cai, Shengbing; Zhang, Yong; Duan, Zhemin

2012-12-01

We report the nanofabrication of a sulfur dioxide (SO2) sensor with a tripolar on-chip microelectrode utilizing a film of single-walled carbon nanotubes (SWCNTs) as the field ionization cathode, where the ion flow current and the partial discharge current generated by the field ionization process of gaseous molecules can be gauged to gas species and concentration. The variation of the sensitivity is less than 4% for all of the tested devices, and the sensor has selectivity against gases such as He, NO2, CO, H2, SO2 and O2. Further, the sensor response presents well-defined and reproducible linear behavior with regard to concentration in the range investigated and a detection limitation of <˜0.5 ppm for SO2. More importantly, a tripolar on-chip microelectrode with SWCNTs as a cathode exhibits an impressive performance with respect to stability and anti-oxidation behavior, which are significantly better than had been possible before in the traditional bipolar sensor under explicit circumstances at room temperature.

Genetically encoded fluorescent voltage sensors using the voltage-sensing domain of Nematostella and Danio phosphatases exhibit fast kinetics.

PubMed

Baker, Bradley J; Jin, Lei; Han, Zhou; Cohen, Lawrence B; Popovic, Marko; Platisa, Jelena; Pieribone, Vincent

2012-07-15

A substantial increase in the speed of the optical response of genetically encoded fluorescent protein voltage sensors (FP voltage sensors) was achieved by using the voltage-sensing phosphatase genes of Nematostella vectensis and Danio rerio. A potential N. vectensis voltage-sensing phosphatase was identified in silico. The voltage-sensing domain (S1-S4) of the N. vectensis homolog was used to create an FP voltage sensor called Nema. By replacing the phosphatase with a cerulean/citrine FRET pair, a new FP voltage sensor was synthesized with fast off kinetics (Tau(off)<5ms). However, the signal was small (ΔF/F=0.4%/200mV). FP voltage sensors using the D. rerio voltage-sensing phosphatase homolog, designated Zahra and Zahra 2, exhibited fast on and off kinetics within 2ms of the time constants observed with the organic voltage-sensitive dye, di4-ANEPPS. Mutagenesis of the S4 region of the Danio FP voltage sensor shifted the voltage dependence to more negative potentials but did not noticeably affect the kinetics of the optical signal. Copyright © 2012 Elsevier B.V. All rights reserved.

Flexible heartbeat sensor for wearable device.

PubMed

Kwak, Yeon Hwa; Kim, Wonhyo; Park, Kwang Bum; Kim, Kunnyun; Seo, Sungkyu

2017-08-15

We demonstrate a flexible strain-gauge sensor and its use in a wearable application for heart rate detection. This polymer-based strain-gauge sensor was fabricated using a double-sided fabrication method with polymer and metal, i.e., polyimide and nickel-chrome. The fabrication process for this strain-gauge sensor is compatible with the conventional flexible printed circuit board (FPCB) processes facilitating its commercialization. The fabricated sensor showed a linear relation for an applied normal force of more than 930 kPa, with a minimum detectable force of 6.25Pa. This sensor can also linearly detect a bending radius from 5mm to 100mm. It is a thin, flexible, compact, and inexpensive (for mass production) heart rate detection sensor that is highly sensitive compared to the established optical photoplethysmography (PPG) sensors. It can detect not only the timing of heart pulsation, but also the amplitude or shape of the pulse signal. The proposed strain-gauge sensor can be applicable to various applications for smart devices requiring heartbeat detection. Copyright © 2017 Elsevier B.V. All rights reserved.

Growth and characterization of GaN nanostructures under various ammoniating time with fabricated Schottky gas sensor based on Si substrate

NASA Astrophysics Data System (ADS)

Abdullah, Q. N.; Ahmed, A. R.; Ali, A. M.; Yam, F. K.; Hassan, Z.; Bououdina, M.; Almessiere, M. A.

2018-05-01

This paper presents the investigation of the influence of the ammoniating time of GaN nanowires (NWs) on the crystalline structure, surface morphology, and optical characteristics. Morphological analysis indicates the growth of good quality and high density of NWs with diameters around 50 nm and lengths up to tens of microns after ammoniating for 30 min. Structural analysis shows that GaN NWs have a typical hexagonal wurtzite crystal structure. Raman spectroscopy confirms the formation of GaN compound with the presence of compressive stress. Photoluminescence (PL) measurements revealed two band emissions, an UV and a broad visible emission. Hydrogen sensor was subsequently fabricated by depositing Pt Schottky contact onto GaN NWs film. The sensor response was measured at various H2 concentrations ranged from 200 up to 1200 ppm at room temperature. It was found that the response increases significantly for low H2 concentration (200-300 ppm) to reach about 50% then increases smoothly to reach 60% at 1200 ppm. The as-fabricated sensor possesses higher performances as compared to similar devices reported in the literature.

Thick-film acoustic emission sensors for use in structurally integrated condition-monitoring applications.

PubMed

Pickwell, Andrew J; Dorey, Robert A; Mba, David

2011-09-01

Monitoring the condition of complex engineering structures is an important aspect of modern engineering, eliminating unnecessary work and enabling planned maintenance, preventing failure. Acoustic emissions (AE) testing is one method of implementing continuous nondestructive structural health monitoring. A novel thick-film (17.6 μm) AE sensor is presented. Lead zirconate titanate thick films were fabricated using a powder/sol composite ink deposition technique and mechanically patterned to form a discrete thick-film piezoelectric AE sensor. The thick-film sensor was benchmarked against a commercial AE device and was found to exhibit comparable responses to simulated acoustic emissions.

Humidity Sensors Printed on Recycled Paper and Cardboard

PubMed Central

Mraović, Matija; Muck, Tadeja; Pivar, Matej; Trontelj, Janez; Pleteršek, Anton

2014-01-01

Research, design, fabrication and results of various screen printed capacitive humidity sensors is presented in this paper. Two types of capacitive humidity sensors have been designed and fabricated via screen printing on recycled paper and cardboard, obtained from the regional paper and cardboard industry. As printing ink, commercially available silver nanoparticle-based conductive ink was used. A considerable amount of work has been devoted to the humidity measurement methods using paper as a dielectric material. Performances of different structures have been tested in a humidity chamber. Relative humidity in the chamber was varied in the range of 35%–80% relative humidity (RH) at a constant temperature of 23 °C. Parameters of interest were capacitance and conductance of each sensor material, as well as long term behaviour. Process reversibility has also been considered. The results obtained show a mainly logarithmic response of the paper sensors, with the only exception being cardboard-based sensors. Recycled paper-based sensors exhibit a change in value of three orders of magnitude, whereas cardboard-based sensors have a change in value of few 10s over the entire scope of relative humidity range (RH 35%–90%). Two different types of capacitor sensors have been investigated: lateral (comb) type sensors and modified, perforated flat plate type sensors. The objective of the present work was to identify the most important factors affecting the material performances with humidity, and to contribute to the development of a sensor system supported with a Radio Frequency Identification (RFID) chip directly on the material, for use in smart packaging applications. Therefore, the authors built a passive and a battery-supported wireless module based on SL900A smart sensory tag's IC to achieve UHF-RFID functionality with data logging capability. PMID:25072347

Silicon Nanowire Field Effect Transistor Sensors with Minimal Sensor to Sensor Variations and Enhanced Sensing Characteristics.

PubMed

Zafar, Sufi; D'Emic, Christopher; Jagtiani, Ashish; Kratschmer, Ernst; Miao, Xin; Zhu, Yu; Mo, Renee; Sosa, Norma; Hamann, Hendrik F; Shahidi, Ghavam; Riel, Heike

2018-06-22

Silicon nanowire field effect transistor (FET) sensors have demonstrated their ability for rapid and label free detection of proteins, nucleotide sequences, and viruses at ultralow concentrations with the potential to be a transformative diagnostic technology. Their nanoscale size gives them their unique ultralow detection ability but also makes their fabrication challenging with large sensor to sensor variations, thus limiting their commercial applications. In this work, a combined approach of nanofabrication, device simulation, materials and electrical characterization is applied towards identifying and improving fabrication steps that induce sensor to sensor variations. An enhanced complementary metal-oxide-semiconductor (CMOS) compatible process for fabricating silicon nanowire FET sensors is demonstrated. Nanowire (30 nm width) FETs with aqueous solution as gates are shown to have the Nernst limit sub-threshold swing SS = 60 mV/decade with ~1.7% variations, whereas literature values for SS are ≥ 80 mV/decade with larger (>10 times) variations. Also, their threshold voltage variations are significantly (~3 times) reduced, compared to literature values. Furthermore, these improved FETs have significantly reduced drain current hysteresis (~0.6 mV) and enhanced on-current to off-current ratios (~10 6 ). These improvements resulted in nanowire FET sensors with lowest (~3%) reported sensor to sensor variations, compared to literature studies. Also, these improved nanowire sensors have the highest reported sensitivity and enhanced signal to noise ratio with the lowest reported defect density of 1x10 18 eV -1 cm -3 in comparison to literature data. In summary, this work brings the nanowire sensor technology a step closer to commercial products for early diagnosis and monitoring of diseases.

sEMG Sensor Using Polypyrrole-Coated Nonwoven Fabric Sheet for Practical Control of Prosthetic Hand

PubMed Central

Jiang, Yinlai; Togane, Masami; Lu, Baoliang; Yokoi, Hiroshi

2017-01-01

One of the greatest challenges of using a myoelectric prosthetic hand in daily life is to conveniently measure stable myoelectric signals. This study proposes a novel surface electromyography (sEMG) sensor using polypyrrole-coated nonwoven fabric sheet as electrodes (PPy electrodes) to allow people with disabilities to control prosthetic limbs. The PPy electrodes are sewn on an elastic band to guarantee close contact with the skin and thus reduce the contact electrical impedance between the electrodes and the skin. The sensor is highly customizable to fit the size and the shape of the stump so that people with disabilities can attach the sensor by themselves. The performance of the proposed sensor was investigated experimentally by comparing measurements of Ag/AgCl electrodes with electrolytic gel and the sEMG from the same muscle fibers. The high correlation coefficient (0.87) between the two types of sensors suggests the effectiveness of the proposed sensor. Another experiment of sEMG pattern recognition to control myoelectric prosthetic hands showed that the PPy electrodes are as effective as Ag/AgCl electrodes for measuring sEMG signals for practical myoelectric control. We also investigated the relation between the myoelectric signals' signal-to-noise ratio and the source impedances by simultaneously measuring the source impedances and the myoelectric signals with a switching circuit. The results showed that differences in both the norm and the phase of the source impedance greatly affect the common mode noise in the signal. PMID:28220058

Self-Activated Transparent All-Graphene Gas Sensor with Endurance to Humidity and Mechanical Bending.

PubMed

Kim, Yeon Hoo; Kim, Sang Jin; Kim, Yong-Jin; Shim, Yeong-Seok; Kim, Soo Young; Hong, Byung Hee; Jang, Ho Won

2015-10-27

Graphene is considered as one of leading candidates for gas sensor applications in the Internet of Things owing to its unique properties such as high sensitivity to gas adsorption, transparency, and flexibility. We present self-activated operation of all graphene gas sensors with high transparency and flexibility. The all-graphene gas sensors which consist of graphene for both sensor electrodes and active sensing area exhibit highly sensitive, selective, and reversible responses to NO2 without external heating. The sensors show reliable operation under high humidity conditions and bending strain. In addition to these remarkable device performances, the significantly facile fabrication process enlarges the potential of the all-graphene gas sensors for use in the Internet of Things and wearable electronics.

Fully-reversible optical sensor for hydrogen peroxide with fast response.

PubMed

Ding, Longjiang; Chen, Siyu; Zhang, Wei; Zhang, Yinglu; Wang, Xu-Dong

2018-05-09

A fully reversible optical sensor for hydrogen peroxide with fast response is presented. The sensor was fabricated by in-situ growing ultra-small platinum nanoparticles (PtNPs) inside the pores of fibrous silica particles (KCC-1). The nanocomposite was then embedded into a hydrogel matrix and form a sensor layer, the immobilized PtNPs can catalytically convert hydrogen peroxide into molecular oxygen, which is measured via luminescent quenching based oxygen sensor underneath. Owing to the high porosity and permeability of KCC-1 and high local concentration of PtNPs, the sensor exhibits fast response (less than 1 min) and full reversibility. The measurement range of the sensor covers 1.0 μM to 10.0 mM, and very small amount of sample is required during measurement (200 μL). Because of its high stability, excellent reversibility and selectivity, and extremely fast response, the sensor could fulfill all industry requirements for real-time measurement, and fill market vacancy.

Research on dual-parameter optical fiber sensor based on thin-core fiber and spherical structure

NASA Astrophysics Data System (ADS)

Tong, Zhengrong; Wang, Xue; Zhang, Weihua; Xue, Lifang

2018-04-01

A novel dual-parameter optical fiber sensor is proposed and experimentally demonstrated. The proposed sensor is based on a fiber in-line Mach-Zehnder interferometer, which is fabricated by sandwiching a section of thin-core fiber between two spherical structures made of single-mode fibers. The transmission spectrum exhibits the response of the interference between the core and the different cladding modes. Due to the different wavelength shifts of the two selected dips, the simultaneous measurement of temperature and the surrounding refractive index can be achieved. The measured temperature sensitivities are 0.067 nm/°C and 0.050 nm/°C, and the refractive index sensitivities are  -119.9 nm/RIU and  -69.71 nm/RIU, respectively. In addition, the compact size, simple fabrication and cost-effectiveness of the fiber sensor are also advantages.

A novel ethanol gas sensor-ZnS/ cyclohexylamine hybrid nanowires.

PubMed

Xu, Lin; Song, Hongwei; Zhang, Tong; Fan, Huitao; Fan, Libo; Wang, Yu; Dong, Biao; Bai, Xue

2011-03-01

We fabricated a novel ethanol gas sensor based on organic-inorganic ZnS/cyclohexylamine (CHA) nanowires via a solvothermal route. The sensor exhibited significantly better performance with response time of approximately 0.6 s and recovery time of approximately 10 s even under a low ethanol concentration and the high surface area, small nanofiber diameter, and hybrid nature made the ZnS/CHA nanowire gas sensor have high sensitivity to ethanol gas at a lower operating current of 160 mA. Moreover, the gas sensing mechanism was proposed on the basis of the two simultaneous steps to explain the adsorbing process due to the hybrid nature. This work indicates that the ZnS/CHA hybrid can be a novel candidate for the ethanol gas sensor with high performance.

Acetone sensor based on zinc oxide hexagonal tubes

DOE Office of Scientific and Technical Information (OSTI.GOV)

Hastir, Anita, E-mail: anitahastir@gmail.com; Singh, Onkar, E-mail: anitahastir@gmail.com; Anand, Kanika, E-mail: anitahastir@gmail.com

2014-04-24

In this work hexagonal tubes of zinc oxide have been synthesized by co-precipitation method. For structural, morphological, elemental and optical analysis synthesized powders were characterized by using x-ray diffraction, field emission scanning microscope, EDX, UV-visible and FTIR techniques. For acetone sensing thick films of zinc oxide have been deposited on alumina substrate. The fabricated sensors exhibited maximum sensing response towards acetone vapour at an optimum operating temperature of 400°C.

Ferroelectric thin-film active sensors for structural health monitoring

NASA Astrophysics Data System (ADS)

Lin, Bin; Giurgiutiu, Victor; Yuan, Zheng; Liu, Jian; Chen, Chonglin; Jiang, Jiechao; Bhalla, Amar S.; Guo, Ruyan

2007-04-01

Piezoelectric wafer active sensors (PWAS) have been proven a valuable tool in structural health monitoring. Piezoelectric wafer active sensors are able to send and receive guided Lamb/Rayleigh waves that scan the structure and detect the presence of incipient cracks and structural damage. In-situ thin-film active sensor deposition can eliminate the bonding layer to improve the durability issue and reduce the acoustic impedance mismatch. Ferroelectric thin films have been shown to have piezoelectric properties that are close to those of single-crystal ferroelectrics but the fabrication of ferroelectric thin films on structural materials (steel, aluminum, titanium, etc.) has not been yet attempted. In this work, in-situ fabrication method of piezoelectric thin-film active sensors arrays was developed using the nano technology approach. Specification for the piezoelectric thin-film active sensors arrays was based on electro-mechanical-acoustical model. Ferroelectric BaTiO3 (BTO) thin films were successfully deposited on Ni tapes by pulsed laser deposition under the optimal synthesis conditions. Microstructural studies by X-ray diffractometer and transmission electron microscopy reveal that the as-grown BTO thin films have the nanopillar structures with an average size of approximately 80 nm in diameter and the good interface structures with no inter-diffusion or reaction. The dielectric and ferroelectric property measurements exhibit that the BTO films have a relatively large dielectric constant, a small dielectric loss, and an extremely large piezoelectric response with a symmetric hysteresis loop. The research objective is to develop the fabrication and optimum design of thin-film active sensor arrays for structural health monitoring applications. The short wavelengths of the micro phased arrays will permit the phased-array imaging of smaller parts and smaller damage than is currently not possible with existing technology.

Highly Sensitive and Very Stretchable Strain Sensor Based on a Rubbery Semiconductor.

PubMed

Kim, Hae-Jin; Thukral, Anish; Yu, Cunjiang

2018-02-07

There is a growing interest in developing stretchable strain sensors to quantify the large mechanical deformation and strain associated with the activities for a wide range of species, such as humans, machines, and robots. Here, we report a novel stretchable strain sensor entirely in a rubber format by using a solution-processed rubbery semiconductor as the sensing material to achieve high sensitivity, large mechanical strain tolerance, and hysteresis-less and highly linear responses. Specifically, the rubbery semiconductor exploits π-π stacked poly(3-hexylthiophene-2,5-diyl) nanofibrils (P3HT-NFs) percolated in silicone elastomer of poly(dimethylsiloxane) to yield semiconducting nanocomposite with a large mechanical stretchability, although P3HT is a well-known nonstretchable semiconductor. The fabricated strain sensors exhibit reliable and reversible sensing capability, high gauge factor (gauge factor = 32), high linearity (R 2 > 0.996), and low hysteresis (degree of hysteresis <12%) responses at the mechanical strain of up to 100%. A strain sensor in this format can be scalably manufactured and implemented as wearable smart gloves. Systematic investigations in the materials design and synthesis, sensor fabrication and characterization, and mechanical analysis reveal the key fundamental and application aspects of the highly sensitive and very stretchable strain sensors entirely from rubbers.

An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications.

PubMed

Mansoor, Mohtashim; Haneef, Ibraheem; Akhtar, Suhail; Rafiq, Muhammad Aftab; De Luca, Andrea; Ali, Syed Zeeshan; Udrea, Florin

2016-11-04

An SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature, pressure and flow rate, has been reported. The multi-sensor chip has been designed keeping in view the requirements of researchers interested in experimental fluid dynamics. The chip contains ten thermodiodes (temperature sensors), a piezoresistive-type pressure sensor and nine hot film-based flow rate sensors fabricated within the oxide layer of the SOI wafers. The silicon dioxide layers with embedded sensors are relieved from the substrate as membranes with the help of a single DRIE step after chip fabrication from a commercial CMOS foundry. Very dense sensor packing per unit area of the chip has been enabled by using technologies/processes like SOI, CMOS and DRIE. Independent apparatuses were used for the characterization of each sensor. With a drive current of 10 µA-0.1 µA, the thermodiodes exhibited sensitivities of 1.41 mV/°C-1.79 mV/°C in the range 20-300 °C. The sensitivity of the pressure sensor was 0.0686 mV/(V excit kPa) with a non-linearity of 0.25% between 0 and 69 kPa above ambient pressure. Packaged in a micro-channel, the flow rate sensor has a linearized sensitivity of 17.3 mV/(L/min) -0.1 in the tested range of 0-4.7 L/min. The multi-sensor chip can be used for simultaneous measurement of fluid pressure, temperature and flow rate in fluidic experiments and aerospace/automotive/biomedical/process industries.

A Highly Sensitive Resistive Pressure Sensor Based on a Carbon Nanotube-Liquid Crystal-PDMS Composite.

PubMed

Pan, Jin; Liu, Shiyu; Yang, Yicheng; Lu, Jiangang

2018-06-08

Resistive pressure sensors generally employ microstructures such as pores and pyramids in the active layer or on the electrodes to reduce the Young’s modulus and improve the sensitivity. However, such pressure sensors always exhibit complex fabrication process and have difficulties in controlling the uniformity of microstructures. In this paper, we demonstrated a highly sensitive resistive pressure sensor based on a composite comprising of low-polarity liquid crystal (LPLC), multi-walled carbon nanotube (MWCNT), and polydimethylsiloxane (PDMS) elastomer. The LPLC in the PDMS forms a polymer-dispersed liquid crystal (PDLC) structure which can not only reduce the Young’s modulus but also contribute to the construction of conductive paths in the active layer. By optimizing the concentration of LC in PDMS elastomer, the resistive pressure sensor shows a high sensitivity of 5.35 kPa −1 , fast response (<150 ms), and great durability. Fabrication process is also facile and the uniformity of the microstructures can be readily controlled. The pressure sensor offers great potential for applications in emerging wearable devices and electronic skins.

Time-domain fiber loop ringdown sensor and sensor network

NASA Astrophysics Data System (ADS)

Kaya, Malik

Optical fibers have been mostly used in fiber optic communications, imaging optics, sensing technology, etc. Fiber optic sensors have gained increasing attention for scientific and structural health monitoring (SHM) applications. In this study, fiber loop ringdown (FLRD) sensors were fabricated for scientific, SHM, and sensor networking applications. FLRD biosensors were fabricated for both bulk refractive index (RI)- and surface RI-based DNA sensing and one type of bacteria sensing. Furthermore, the effect of glucose oxidase (GOD) immobilization at the sensor head on sensor performance was evaluated for both glucose and synthetic urine solutions with glucose concentration between 0.1% and 10%. Detection sensitivities of the glucose sensors were achieved as low as 0.05%. For chemical sensing, heavy water, ranging from 97% to 10%, and several elemental solutions were monitored by using the FLRD chemical sensors. Bulk index-based FLRD sensing showed that trace elements can be detected in deionized water. For physical sensing, water and cracking sensors were fabricated and embedded into concrete. A partially-etched single-mode fiber (SMF) was embedded into a concrete bar for water monitoring while a bare SMF without any treatment was directly embedded into another concrete bar for monitoring cracks. Furthermore, detection sensitivities of water and crack sensors were investigated as 10 ml water and 0.5 mm surface crack width, respectively. Additionally fiber loop ringdown-fiber Bragg grating temperature sensors were developed in the laboratory; two sensor units for water, crack, and temperature sensing were deployed into a concrete cube in a US Department of Energy test bed (Miami, FL). Multi-sensor applications in a real concrete structure were accomplished by testing the six FLRD sensors. As a final stage, a sensor network was assembled by multiplexing two or three FLRD sensors in series and parallel. Additionally, two FLRD sensors were combined in series and

Polymer planar waveguide Bragg gratings: fabrication, characterization, and sensing applications

NASA Astrophysics Data System (ADS)

Rosenberger, M.; Hessler, S.; Pauer, H.; Girschikofsky, M.; Roth, G. L.; Adelmann, B.; Woern, H.; Schmauss, B.; Hellmann, R.

2017-02-01

In this contribution, we give a comprehensive overview of the fabrication, characterization, and application of integrated planar waveguide Bragg gratings (PPBGs) in cyclo-olefin copolymers (COC). Starting with the measurement of the refractive index depth profile of integrated UV-written structures in COC by phase shifting Mach-Zehnder- Interferometry, we analyze the light propagation using numerical simulations. Furthermore, we show the rapid fabrication of humidity insensitive polymer waveguide Bragg gratings in cyclo-olefin copolymers and discuss the influence of the UV-dosage onto the spectral characteristics and the transmission behavior of the waveguide. Based on these measurements we exemplify that our Bragg gratings exhibit a reflectivity of over 99 % and are highly suitable for sensing applications. With regard to a negligible affinity to absorb water and in conjunction with high temperature stability these polymer devices are ideal for mechanical deformation sensing. Since planar structures are not limited to tensile but can also be applied for measuring compressive strain, we manufacture different functional devices and corroborate their applicability as optical sensors. Exemplarily, we highlight a temperature referenced PPBG sensor written into a femtosecond-laser cut tensile test geometry for tensile and compressive strain sensing. Furthermore, a flexible polymer planar shape sensor is presented.

Fabrication of directional sound sensor by silicon micromachining

NASA Astrophysics Data System (ADS)

Touse, Michael; Catterlin, Jeffrey; Sinibaldi, Jose; Karunasiri, Gamani

2009-03-01

A directional sound sensor based on the operational principle of the Ormia ochracea fly's hearing organism [1] was fabricated using micro-electromechanical system (MEMS) technology. The fly uses coupled bars hinged at the center to achieve directional sound sensing by monitoring the difference in their vibration amplitudes. The MEMS design employed in this work consisted of a 1x2 square millimeter polysilicon membrane hinged at the center and positioned about 1 micrometer above the substrate using a sacrificial silicon dioxide layer. Finite element analysis of the device shows two primary vibrational mode frequencies, one corresponding to a rocking mode which is highly dependent on angle of incidence, and the other to a bending motion which remains constant through all angles. Using a laser vibrometer to measure response, rocking and bending modes were observed at driving frequencies of 3.0 and 11.4 kHz, respectively, and angular dependence was in close agreement with modeling. [1] R.N. Miles, R. Robert, and R. R. Hoy, ``Mechanically coupled ears for directional hearing in the parasitoid fly Ormia ochracea,'' J. Acoust. Soc. Am., 98 (6), Dec. 1995

Low-Temperature Photochemically Activated Amorphous Indium-Gallium-Zinc Oxide for Highly Stable Room-Temperature Gas Sensors.

PubMed

Jaisutti, Rawat; Kim, Jaeyoung; Park, Sung Kyu; Kim, Yong-Hoon

2016-08-10

We report on highly stable amorphous indium-gallium-zinc oxide (IGZO) gas sensors for ultraviolet (UV)-activated room-temperature detection of volatile organic compounds (VOCs). The IGZO sensors fabricated by a low-temperature photochemical activation process and exhibiting two orders higher photocurrent compared to conventional zinc oxide sensors, allowed high gas sensitivity against various VOCs even at room temperature. From a systematic analysis, it was found that by increasing the UV intensity, the gas sensitivity, response time, and recovery behavior of an IGZO sensor were strongly enhanced. In particular, under an UV intensity of 30 mW cm(-2), the IGZO sensor exhibited gas sensitivity, response time and recovery time of 37%, 37 and 53 s, respectively, against 750 ppm concentration of acetone gas. Moreover, the IGZO gas sensor had an excellent long-term stability showing around 6% variation in gas sensitivity over 70 days. These results strongly support a conclusion that a low-temperature solution-processed amorphous IGZO film can serve as a good candidate for room-temperature VOCs sensors for emerging wearable electronics.

Chemical Gas Sensors for Aeronautic and Space Applications 2

NASA Technical Reports Server (NTRS)

Hunter, G. W.; Chen, L. Y.; Neudeck, P. G.; Knight, D.; Liu, C. C.; Wu, Q. H.; Zhou, H. J.; Makel, D.; Liu, M.; Rauch, W. A.

1998-01-01

Aeronautic and Space applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. Areas of most interest include launch vehicle safety monitoring emission monitoring and fire detection. This paper discusses the needs of aeronautic and space applications and the point-contact sensor technology being developed to address these needs. The development of these sensor is based on progress two types of technology: 1) Micro-machining and micro-fabrication technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Sensor development for each application involves its own challenges in the fields of materials science and fabrication technology. The number of dual-use commercial applications of this micro-fabricated gas sensor technology make this area of sensor development a field of significant interest.

Bio-inspired Fabrication of Complex Hierarchical Structure in Silicon.

PubMed

Gao, Yang; Peng, Zhengchun; Shi, Tielin; Tan, Xianhua; Zhang, Deqin; Huang, Qiang; Zou, Chuanping; Liao, Guanglan

2015-08-01

In this paper, we developed a top-down method to fabricate complex three dimensional silicon structure, which was inspired by the hierarchical micro/nanostructure of the Morpho butterfly scales. The fabrication procedure includes photolithography, metal masking, and both dry and wet etching techniques. First, microscale photoresist grating pattern was formed on the silicon (111) wafer. Trenches with controllable rippled structures on the sidewalls were etched by inductively coupled plasma reactive ion etching Bosch process. Then, Cr film was angled deposited on the bottom of the ripples by electron beam evaporation, followed by anisotropic wet etching of the silicon. The simple fabrication method results in large scale hierarchical structure on a silicon wafer. The fabricated Si structure has multiple layers with uniform thickness of hundreds nanometers. We conducted both light reflection and heat transfer experiments on this structure. They exhibited excellent antireflection performance for polarized ultraviolet, visible and near infrared wavelengths. And the heat flux of the structure was significantly enhanced. As such, we believe that these bio-inspired hierarchical silicon structure will have promising applications in photovoltaics, sensor technology and photonic crystal devices.

Fabrication and Performance of Large Format Transition Edge Sensor Microcalorimeter Arrays

NASA Technical Reports Server (NTRS)

Chervenak, James A.; Adams, James S.; Bandler, Simon R.; Busch, Sara E.; Eckart, M. E.; Ewin, A. E.; Finkbeiner, F. M.; Kilbourne, C. A.; Kelley, R. L.; Porst, Jan-Patrick;

Configurable UUV Sensor Network II

DTIC Science & Technology

2017-12-13

the South Florida Ocean Test Facility (SFOMF). A larger 3”-diameter ball-shaped electric field sensor was developed and fabricated. A pre -amplifier...magnetic field sensors, and tested at the South Florida Ocean Test Facility (SFOMF). A larger 3”-diameter ball-shaped electric field sensor was developed...and fabricated. Testing of the 3”-diameter ball-shaped sensor at UI showed a noise floor of IpV/m RMS in the frequency band 0.02-20 Hz. UUV

Fabrication of Transition Edge Sensor Microcalorimeters for X-Ray Focal Planes

NASA Technical Reports Server (NTRS)

Chervenak, James A.; Adams, Joseph S.; Audley, Heather; Bandler, Simon R.; Betancourt-Martinez, Gabriele; Eckart, Megan E.; Finkbeiner, Fred M.; Kelley, Richard L.; Kilbourne, Caroline; Lee, Sang Jun;

Fiber optic refractive index and magnetic field sensors based on microhole-induced inline Mach-Zehnder interferometers

NASA Astrophysics Data System (ADS)

Chen, Feifei; Jiang, Yi; Zhang, Liuchao; Jiang, Lan; Wang, Sumei

2018-04-01

A compact microhole-induced fiber optic inline Mach-Zehnder interferometer (MZI) is demonstrated for measurements of refractive index (RI) and magnetic field. Inline MZIs with different etched diameters, different interaction lengths and different sizes of microholes are fabricated and assessed. The optical transmission spectra of the inline MZIs immersed into a series of liquids are characterized and analysed. Experimental results show that liquid RI sensitivity as high as 539.8436 nm RIU-1 in the RI range of 1.3352-1.4113 RIU is achieved and also exhibits good linearity with a correlation coefficient  >93%. An inline MZI is also fabricated to be a magnetic field sensor by using magnetic fluid material. The experimental results show that this magnetic field sensor has a high sensitivity of  -275.6 pm Oe-1. The inline MZI-based fiber optic sensors possess many advantages, such as small size, simple fabrication, high sensitivity and good linearity, which has a wide application potential in chemical, biological and environmental sensing fields.

Commercialization of Micro-fabrication of Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Studies of the Cosmic Microwave Background

NASA Astrophysics Data System (ADS)

Suzuki, Aritoki; Bebek, Chris; Garcia-Sciveres, Maurice; Holland, Stephen; Kusaka, Akito; Lee, Adrian T.; Palaio, Nicholas; Roe, Natalie; Steinmetz, Leo

2018-04-01

We report on the development of commercially fabricated multichroic antenna-coupled transition edge sensor (TES) bolometer arrays for cosmic microwave background (CMB) polarimetry experiments. CMB polarimetry experiments have deployed instruments in stages. Stage II experiments deployed with O(1000) detectors and reported successful detection of B-mode (divergence-free) polarization pattern in the CMB. Stage III experiments have recently started observing with O(10,000) detectors with wider frequency coverage. A concept for a stage IV experiment, CMB-S4, is emerging to make a definitive measurement of CMB polarization from the ground with O(400,000) detectors. The orders of magnitude increase in detector count for CMB-S4 require a new approach in detector fabrication to increase fabrication throughput and reduce the cost. We report on collaborative efforts with two commercial micro-fabrication foundries to fabricate antenna-coupled TES bolometer detectors. The detector design is based on the sinuous antenna-coupled dichroic detector from the POLARBEAR-2 experiment. The TES bolometers showed the expected I-V response, and the RF performance agrees with the simulation. We will discuss the motivation, design consideration, fabrication processes, test results, and how industrial detector fabrication could be a path to fabricate hundreds of detector wafers for future CMB polarimetry experiments.

Bio-compatible organic humidity sensor transferred to arbitrary surfaces fabricated using single-cell-thick onion membrane as both the substrate and sensing layer

NASA Astrophysics Data System (ADS)

Sajid, Memoon; Aziz, Shahid; Kim, Go Bum; Kim, Soo Wan; Jo, Jeongdai; Choi, Kyung Hyun

2016-07-01

A bio-compatible disposable organic humidity sensor has been fabricated that can be transferred to any arbitrary target surface. Single cell thick onion membrane has been used as the substrate while it also doubles as the active layer of the sensor. Two different types of sensors were fabricated. In type-1, the membrane was fixed into a plastic frame with IDT patterns on one side while the other side was also exposed to environment. In type-2, onion membrane was attached to a glass substrate with one side exposed to environment having an IDT screen-printed on top of it. The electrical output response of the sensors showed their ability to detect relative humidity between 0% RH and 80% RH with stable response and good sensitivity. The impedance of the sensors changed from 16 MΩ to 2 MΩ for type-1 and 6 MΩ to 20 KΩ for type-2. The response times of type-1 and type-2 were ~1 and 1.5 seconds respectively. The recovery times were ~10.75 seconds and ~11.25 seconds for type-1 and type-2 respectively. The device was successfully transferred to various randomly shaped surfaces without damaging the device.

Design and testing of RFID sensor tag fabricated using inkjet-printing and electrodeposition

NASA Astrophysics Data System (ADS)

Chien Dang, Mau; Son Nguyen, Dat; Dung Dang, Thi My; Tedjini, Smail; Fribourg-Blanc, Eric

2014-06-01

The passive RFID tag with an added sensing function is of interest to many applications. In particular, applications where RFID tagging is already considered to be the next step, such as food items, are a specific target. This paper demonstrates a flexible RFID tag sensor fabricated using a low cost technique with an added zero-cost sensing function. It is more specifically applied to the sensing of degradable food, in particular beef meat in our demonstrated example. To reach this, the antenna is designed in such a way to be sensitive to the variation of the dielectric permittivity of the meat over time. The design of the sensing tag as well as its fabrication process are described. The fabrication involves inkjet printing of a silver nanoparticle based ink on a commercial low cost PET film to create a seed layer. It is followed by a copper electrodeposition step on top of the silver pattern to complete the tag to obtain the desired thickness and conductivity of the tag antenna. The results of the electrical tests showed that with the inkjet printing-electrodeposition combination it is possible to produce flexible electrically conductive patterns for practical RFID applications. The tag was then tested in close-to-real-world conditions and it is demonstrated that it can provide a sensing function to detect the consumption limit of the packaged beef.

An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications †

PubMed Central

Mansoor, Mohtashim; Haneef, Ibraheem; Akhtar, Suhail; Rafiq, Muhammad Aftab; De Luca, Andrea; Ali, Syed Zeeshan; Udrea, Florin

2016-01-01

An SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature, pressure and flow rate, has been reported. The multi-sensor chip has been designed keeping in view the requirements of researchers interested in experimental fluid dynamics. The chip contains ten thermodiodes (temperature sensors), a piezoresistive-type pressure sensor and nine hot film-based flow rate sensors fabricated within the oxide layer of the SOI wafers. The silicon dioxide layers with embedded sensors are relieved from the substrate as membranes with the help of a single DRIE step after chip fabrication from a commercial CMOS foundry. Very dense sensor packing per unit area of the chip has been enabled by using technologies/processes like SOI, CMOS and DRIE. Independent apparatuses were used for the characterization of each sensor. With a drive current of 10 µA–0.1 µA, the thermodiodes exhibited sensitivities of 1.41 mV/°C–1.79 mV/°C in the range 20–300 °C. The sensitivity of the pressure sensor was 0.0686 mV/(Vexcit kPa) with a non-linearity of 0.25% between 0 and 69 kPa above ambient pressure. Packaged in a micro-channel, the flow rate sensor has a linearized sensitivity of 17.3 mV/(L/min)−0.1 in the tested range of 0–4.7 L/min. The multi-sensor chip can be used for simultaneous measurement of fluid pressure, temperature and flow rate in fluidic experiments and aerospace/automotive/biomedical/process industries. PMID:27827904

Parametric investigation of scalable tactile sensors

NASA Astrophysics Data System (ADS)

Saadatzi, Mohammad Nasser; Yang, Zhong; Baptist, Joshua R.; Sahasrabuddhe, Ritvij R.; Wijayasinghe, Indika B.; Popa, Dan O.

2017-05-01

In the near future, robots and humans will share the same environment and perform tasks cooperatively. For intuitive, safe, and reliable physical human-robot interaction (pHRI), sensorized robot skins for tactile measurements of contact are necessary. In a previous study, we presented skins consisting of strain gauge arrays encased in silicone encapsulants. Although these structures could measure normal forces applied directly onto the sensing elements, they also exhibited blind spots and response asymmetry to certain loading patterns. This study presents a parametric investigation of piezoresistive polymeric strain gauge that exhibits a symmetric omniaxial response thanks to its novel star-shaped structure. This strain gauge relies on the use of gold micro-patterned star-shaped structures with a thin layer of PEDOT:PSS which is a flexible polymer with piezoresistive properties. In this paper, the sensor is first modeled and comprehensively analyzed in the finite-element simulation environment COMSOL. Simulations include stress-strain loading for a variety of structure parameters such as gauge lengths, widths, and spacing, as well as multiple load locations relative to the gauge. Subsequently, sensors with optimized configurations obtained through simulations were fabricated using cleanroom photolithographic and spin-coating processes, and then experimentally tested. Results show a trend-wise agreement between experiments and simulations.

Patterned, highly stretchable and conductive nanofibrous PANI/PVDF strain sensors based on electrospinning and in situ polymerization.

PubMed

Yu, Gui-Feng; Yan, Xu; Yu, Miao; Jia, Meng-Yang; Pan, Wei; He, Xiao-Xiao; Han, Wen-Peng; Zhang, Zhi-Ming; Yu, Liang-Min; Long, Yun-Ze

2016-02-07

A facile fabrication strategy via electrospinning and followed by in situ polymerization to fabricate a patterned, highly stretchable, and conductive polyaniline/poly(vinylidene fluoride) (PANI/PVDF) nanofibrous membrane is reported. Owing to the patterned structure, the nanofibrous PANI/PVDF strain sensor can detect a strain up to 110%, for comparison, which is 2.6 times higher than the common nonwoven PANI/PVDF mat and much larger than the previously reported values (usually less than 15%). Meanwhile, the conductivity of the patterned strain sensor shows a linear response to the applied strain in a wide range from 0% to about 85%. Additionally, the patterned PANI/PVDF strain sensor can completely recover to its original electrical and mechanical values within a strain range of more than 22%, and exhibits good durability over 10,000 folding-unfolding tests. Furthermore, the strain sensor also can be used to detect finger motion. The results demonstrate promising application of the patterned nanofibrous membrane in flexible electronic fields.

Fabrication and In Situ Testing of Scalable Nitrate-Selective Electrodes for Distributed Observations

NASA Astrophysics Data System (ADS)

Harmon, T. C.; Rat'ko, A.; Dietrich, H.; Park, Y.; Wijsboom, Y. H.; Bendikov, M.

2008-12-01

Inorganic nitrogen (nitrate (NO3-) and ammonium (NH+)) from chemical fertilizer and livestock waste is a major source of pollution in groundwater, surface water and the air. While some sources of these chemicals, such as waste lagoons, are well-defined, their application as fertilizer has the potential to create distributed or non-point source pollution problems. Scalable nitrate sensors (small and inexpensive) would enable us to better assess non-point source pollution processes in agronomic soils, groundwater and rivers subject to non-point source inputs. This work describes the fabrication and testing of inexpensive PVC-membrane- based ion selective electrodes (ISEs) for monitoring nitrate levels in soil water environments. ISE-based sensors have the advantages of being easy to fabricate and use, but suffer several shortcomings, including limited sensitivity, poor precision, and calibration drift. However, modern materials have begun to yield more robust ISE types in laboratory settings. This work emphasizes the in situ behavior of commercial and fabricated sensors in soils subject to irrigation with dairy manure water. Results are presented in the context of deployment techniques (in situ versus soil lysimeters), temperature compensation, and uncertainty analysis. Observed temporal responses of the nitrate sensors exhibited diurnal cycling with elevated nitrate levels at night and depressed levels during the day. Conventional samples collected via lysimeters validated this response. It is concluded that while modern ISEs are not yet ready for long-term, unattended deployment, short-term installations (on the order of 2 to 4 days) are viable and may provide valuable insights into nitrogen dynamics in complex soil systems.

Review of Recent Metamaterial Microfluidic Sensors.

PubMed

Salim, Ahmed; Lim, Sungjoon

2018-01-15

Metamaterial elements/arrays exhibit a sensitive response to fluids yet with a small footprint, therefore, they have been an attractive choice to realize various sensing devices when integrated with microfluidic technology. Micro-channels made from inexpensive biocompatible materials avoid any contamination from environment and require only microliter-nanoliter sample for sensing. Simple design, easy fabrication process, light weight prototype, and instant measurements are advantages as compared to conventional (optical, electrochemical and biological) sensing systems. Inkjet-printed flexible sensors find their utilization in rapidly growing wearable electronics and health-monitoring flexible devices. Adequate sensitivity and repeatability of these low profile microfluidic sensors make them a potential candidate for point-of-care testing which novice patients can use reliably. Aside from degraded sensitivity and lack of selectivity in all practical microwave chemical sensors, they require an instrument, such as vector network analyzer for measurements and not readily available as a self-sustained portable sensor. This review article presents state-of-the-art metamaterial inspired microfluidic bio/chemical sensors (passive devices ranging from gigahertz to terahertz range) with an emphasis on metamaterial sensing circuit and microfluidic detection. We also highlight challenges and strategies to cope these issues which set future directions.

MOFs for the Sensitive Detection of Ammonia: Deployment of fcu-MOF Thin Films as Effective Chemical Capacitive Sensors.

PubMed

Assen, Ayalew H; Yassine, Omar; Shekhah, Osama; Eddaoudi, Mohamed; Salama, Khaled N

2017-09-22

This work reports on the fabrication and deployment of a select metal-organic framework (MOF) thin film as an advanced chemical capacitive sensor for the sensing/detection of ammonia (NH 3 ) at room temperature. Namely, the MOF thin film sensing layer consists of a rare-earth (RE) MOF (RE-fcu-MOF) deposited on a capacitive interdigitated electrode (IDE). Purposely, the chemically stable naphthalene-based RE-fcu-MOF (NDC-Y-fcu-MOF) was elected and prepared/arranged as a thin film on a prefunctionalized capacitive IDE via the solvothermal growth method. Unlike earlier realizations, the fabricated MOF-based sensor showed a notable detection sensitivity for NH 3 at concentrations down to 1 ppm, with a detection limit appraised to be around 100 ppb (at room temperature) even in the presence of humidity and/or CO 2 . Distinctly, the NDC-Y-fcu-MOF based sensor exhibited the required stability to NH 3 , in contrast to other reported MOFs, and a remarkable detection selectivity toward NH 3 vs CH 4 , NO 2 , H 2 , and C 7 H 8 . The NDC-Y-fcu-MOF based sensor exhibited excellent performance for sensing ammonia for simulated breathing system in the presence of the mixture of carbon dioxide and/or humidity (water vapor), with no major alteration in the detection signal.

Performance of terahertz metamaterials as high-sensitivity sensor

NASA Astrophysics Data System (ADS)

He, Yanan; Zhang, Bo; Shen, Jingling

2017-09-01

A high-sensitivity sensor based on the resonant transmission characteristics of terahertz (THz) metamaterials was investigated, with the proposal and fabrication of rectangular bar arrays of THz metamaterials exhibiting a period of 180 μm on a 25 μm thick flexible polyimide. Varying the size of the metamaterial structure revealed that the length of the rectangular unit modulated the resonant frequency, which was verified by both experiment and simulation. The sensing characteristics upon varying the surrounding media in the sample were tested by simulation and experiment. Changing the surrounding medium from that of air to that of alcohol or oil produced resonant frequency redshifts of 80 GHz or 150 GHz, respectively, which indicates that the sensor possessed a high sensitivity of 667 GHz per unit of refractive index. Finally, the influence of the sample substrate thickness on the sensor sensitivity was investigated by simulation. It may be a reference for future sensor design.

Development of advanced high-temperature heat flux sensors

NASA Technical Reports Server (NTRS)

Atkinson, W. H.; Strange, R. R.

1982-01-01

Various configurations of high temperature, heat flux sensors were studied to determine their suitability for use in experimental combustor liners of advanced aircraft gas turbine engines. It was determined that embedded thermocouple sensors, laminated sensors, and Gardon gauge sensors, were the most viable candidates. Sensors of all three types were fabricated, calibrated, and endurance tested. All three types of sensors met the fabricability survivability, and accuracy requirements established for their application.

Small CO2 Sensors Operate at Lower Temperature

NASA Technical Reports Server (NTRS)

Hunter, Gary W.; Xu, Jennifer C.

2009-01-01

Solid-electrolyte-based amperometric sensors for measuring concentrations of CO2 in air are being developed for use in detection of fires, environmental monitoring, and other applications where liquid-based electrochemical cells are problematic. These sensors are small (sizes of the order of a millimeter), are robust, are amenable to batch fabrication at relatively low cost, and exhibit short response times (seconds) and wide detection ranges. A sensor of this type at a previous stage of development included a solid electrolyte of Na3Zr2Si2PO12 deposited mainly between interdigitated Pt electrodes on an alumina substrate, all overcoated with an auxiliary solid electrolyte of (Na2CO3:BaCO3 in a molar ratio of 1:1.7). It was necessary to heat this device to a temperature as high as 600 C to obtain the desired sensitivity and rapid response. Heating sensors increases the power consumption of the sensor system and complicates the use of the sensor in some applications. Thus, decreasing a sensor s power consumption while maintaining its performance is a technical goal of ongoing development.

[INVITED] Porphyrin-nanoassembled fiber-optic gas sensor fabrication: Optimization of parameters for sensitive ammonia gas detection

NASA Astrophysics Data System (ADS)

Korposh, Sergiy; Kodaira, Suguru; Selyanchyn, Roman; Ledezma, Francisco H.; James, Stephen W.; Lee, Seung-Woo

2018-05-01

Highly sensitive fiber-optic ammonia gas sensors were fabricated via layer-by-layer deposition of poly(diallyldimethylammonium chloride) (PDDA) and tetrakis(4-sulfophenyl)porphine (TSPP) onto the surface of the core of a hard-clad multimode fiber that was stripped of its polymer cladding. The effects of film thickness, length of sensing area, and depth of evanescent wave penetration were investigated to clearly understand the sensor performance. The sensitivity of the fiber-optic sensor to ammonia was linear in the concentration range of 0.5-50 ppm and the response and recovery times were less than 3 min, with a limit of detection of 0.5 ppm, when a ten-cycle PDDA/TSPP film was assembled on the surface of the core along a 1 cm-long stripped section of the fiber. The sensor's response towards ammonia was also checked under different relative humidity conditions and a simple statistical data treatment approach, principal component analysis, demonstrated the feasibility of ammonia sensing in environmental relative humidity ranging from dry 7% to highly saturated 80%. Penetration depths of the evanescent wave for the optimal sensor configuration were estimated to be 30 and 33 nm at wavelengths of 420 and 706 nm, which are in a good agreement with the thickness of the 10-cycle deposited film (ca. 30 nm).

A MEMS sensor for AC electric current

NASA Astrophysics Data System (ADS)

Leland, Eli Sidney

This manuscript describes the development of a new MEMS sensor for the measurement of AC electric current. The sensor is comprised of a MEMS piezoelectric cantilever with a microscale permanent magnet mounted to the cantilever's free end. When placed near a wire carrying AC current, the magnet couples to the oscillating magnetic field surrounding the wire, causing the cantilever to deflect, and piezoelectric coupling produces a sinusoidal voltage proportional to the current in the wire. The sensor is itself passive, requiring no power supply to operate. It also operates on proximity and need only be placed near a current carrier in order to function. The sensor does not need to encircle the current carrier and it therefore can measure current in two-wire zip-cords without necessitating the separation of the two conductors. Applications for tins sensor include measuring residential and commercial electricity use and monitoring electric power distribution networks. An analytical model describing the behavior of the current sensor was developed. This model was also adapted to describe the power output of an energy scavenger coupled to a wire carrying AC current. A mesoscale sensor exhibited a sensitivity of 75 mV/A when measuring AC electric current in a zip-cord. A mesoscale energy scavenger produced 345 muW when coupled to a zip-cord carrying 13 A. MEMS current sensors were fabricated from aluminum nitride piezoelectric cantilevers and composite permanent magnets. The cantilevers were fabricated using a four-mask process. Microscale permanent magnets were dispenser-printed using NdFeB magnetic powder with an epoxy binder. The MEMS AC current sensor was interfaced with amplification circuitry and packaged inside an almninum enclosure. The sensor was also integrated with a mesoscale energy scavenger and power conditioning circuitry to create a fully self-powered current sensor. Unamplified sensitivity of the sensor was 0.1-1.1 mV/A when measuring currents in single

A novel approach for fabricating NiO hollow spheres for gas sensors

NASA Astrophysics Data System (ADS)

Kuang, Chengwei; Zeng, Wen; Ye, Hong; Li, Yanqiong

2018-03-01

Hollow spheres are usually fabricated by hard template methods or soft template methods with soft surfactants, which is quiet tedious and time-consuming. In this paper, NiO hollow spheres with fluffy surface were successfully synthesized by a facile hydrothermal method and subsequent calcination, where bubbles acted as the template. NiO hollow spheres exhibited excellent gas sensing performances, which results from its hollow structure and high specific surface area. In addition, a possible evolution mechanism of NiO hollow spheres was proposed based on experimental results.

High performance flexible pH sensor based on polyaniline nanopillar array electrode.

PubMed

Yoon, Jo Hee; Hong, Seok Bok; Yun, Seok-Oh; Lee, Seok Jae; Lee, Tae Jae; Lee, Kyoung G; Choi, Bong Gill

2017-03-15

Flexible pH sensor technologies have attracted a great deal of attention in many applications, such as, wearable health care devices and monitors for chemical and biological processes. Here, we fabricated flexible and thin pH sensors using a two electrode configuration comprised of a polyaniline nanopillar (PAN) array working electrode and an Ag/AgCl reference electrode. In order to provide nanostructure, soft lithography using a polymeric blend was employed to create a flexible nanopillar backbone film. Polyaniline-sensing materials were deposited on a patterned-nanopillar array by electrochemical deposition. The pH sensors produced exhibited a near-Nernstian response (∼60.3mV/pH), which was maintained in a bent state. In addition, pH sensors showed other excellent sensor performances in terms of response time, reversibility, repeatability, selectivity, and stability. Copyright © 2016 Elsevier Inc. All rights reserved.

Enhancement of NH3 Gas Sensitivity at Room Temperature by Carbon Nanotube-Based Sensor Coated with Co Nanoparticles

PubMed Central

Nguyen, Lich Quang; Phan, Pho Quoc; Duong, Huyen Ngoc; Nguyen, Chien Duc; Nguyen, Lam Huu

2013-01-01

Multi-walled carbon nanotube (MWCNT) film has been fabricated onto Pt-patterned alumina substrates using the chemical vapor deposition method for NH3 gas sensing applications. The MWCNT-based sensor is sensitive to NH3 gas at room temperature. Nanoclusters of Co catalysts have been sputtered on the surface of the MWCNT film to enhance gas sensitivity with respect to unfunctionalized CNT films. The gas sensitivity of Co-functionalized MWCNT-based gas sensors is thus significantly improved. The sensor exhibits good repeatability and high selectivity towards NH3, compared with alcohol and LPG. PMID:23364198

Enhancement of NH3 gas sensitivity at room temperature by carbon nanotube-based sensor coated with Co nanoparticles.

PubMed

Nguyen, Lich Quang; Phan, Pho Quoc; Duong, Huyen Ngoc; Nguyen, Chien Duc; Nguyen, Lam Huu

2013-01-30

Multi-walled carbon nanotube (MWCNT) film has been fabricated onto Pt-patterned alumina substrates using the chemical vapor deposition method for NH(3) gas sensing applications. The MWCNT-based sensor is sensitive to NH(3) gas at room temperature. Nanoclusters of Co catalysts have been sputtered on the surface of the MWCNT film to enhance gas sensitivity with respect to unfunctionalized CNT films. The gas sensitivity of Co-functionalized MWCNT-based gas sensors is thus significantly improved. The sensor exhibits good repeatability and high selectivity towards NH(3), compared with alcohol and LPG.

Blue-light photoelectrochemical sensor based on nickel tetra-amined phthalocyanine-graphene oxide covalent compound for ultrasensitive detection of erythromycin.

PubMed

Peng, Jinyun; Huang, Qing; Zhuge, Wenfeng; Liu, Yuxia; Zhang, Cuizong; Yang, Wei; Xiang, Gang

2018-05-30

In this study, we developed a novel photoelectrochemical (PEC) sensor for the highly sensitive detection of erythromycin by functionalising graphene oxide (GO) with nickel tetra-amined phthalocyanine (NiTAPc) through covalent bonding, which resulted in the formation of NiTAPc-Gr. The fabricated sensor showed a higher PEC efficiency under blue light, exhibiting a peak wavelength of 456 nm, as compared to that of the monomer. Further, the NiTAPc-Gr/indium tin oxide (ITO) sensor exhibited a photocurrent that was 50-fold higher than that for a GO/ITO sensor under the same conditions. Under optimal conditions, the NiTAPc-Gr PEC sensor showed a linear response for erythromycin concentrations ranging from 0.40 to 120.00 μmol L -1 , with the minimum limit for detection being 0.08 μmol L -1 . Thus, the NiTAPc-Gr sensor exhibited superior performance and excellent PEC characteristics, high stability, and good reproducibility with respect to the sensing of erythromycin. Moreover, it is convenient to use, fast, small, and cheap to produce. Hence, it should find wide use in the analysis of erythromycin in real-world applications. Copyright © 2018 Elsevier B.V. All rights reserved.

Improvements in purification of silver nanowires by decantation and fabrication of flexible transparent electrodes. Application to capacitive touch sensors.

PubMed

Mayousse, Céline; Celle, Caroline; Moreau, Eléonore; Mainguet, Jean-François; Carella, Alexandre; Simonato, Jean-Pierre

2013-05-31

Transparent flexible electrodes made of metallic nanowires, and in particular silver nanowires (AgNWs), appear as an extremely promising alternative to transparent conductive oxides for future optoelectronic devices. Though significant progresses have been made the last few years, there is still some room for improvement regarding the synthesis of high quality silver nanowire solutions and fabrication process of high performance electrodes. We show that the commonly used purification process can be greatly simplified through decantation. Using this process it is possible to fabricate flexible electrodes by spray coating with sheet resistance lower than 25 Ω sq⁻¹ at 90% transparency in the visible spectrum. These electrodes were used to fabricate an operative transparent flexible touch screen. To our knowledge this is the first reported AgNW based touch sensor relying on capacitive technology.

Design, fabrication and experimental validation of a novel dry-contact sensor for measuring electroencephalography signals without skin preparation.

PubMed

Liao, Lun-De; Wang, I-Jan; Chen, Sheng-Fu; Chang, Jyh-Yeong; Lin, Chin-Teng

2011-01-01

In the present study, novel dry-contact sensors for measuring electro-encephalography (EEG) signals without any skin preparation are designed, fabricated by an injection molding manufacturing process and experimentally validated. Conventional wet electrodes are commonly used to measure EEG signals; they provide excellent EEG signals subject to proper skin preparation and conductive gel application. However, a series of skin preparation procedures for applying the wet electrodes is always required and usually creates trouble for users. To overcome these drawbacks, novel dry-contact EEG sensors were proposed for potential operation in the presence or absence of hair and without any skin preparation or conductive gel usage. The dry EEG sensors were designed to contact the scalp surface with 17 spring contact probes. Each probe was designed to include a probe head, plunger, spring, and barrel. The 17 probes were inserted into a flexible substrate using a one-time forming process via an established injection molding procedure. With these 17 spring contact probes, the flexible substrate allows for high geometric conformity between the sensor and the irregular scalp surface to maintain low skin-sensor interface impedance. Additionally, the flexible substrate also initiates a sensor buffer effect, eliminating pain when force is applied. The proposed dry EEG sensor was reliable in measuring EEG signals without any skin preparation or conductive gel usage, as compared with the conventional wet electrodes.

Design, Fabrication and Experimental Validation of a Novel Dry-Contact Sensor for Measuring Electroencephalography Signals without Skin Preparation

PubMed Central

Liao, Lun-De; Wang, I-Jan; Chen, Sheng-Fu; Chang, Jyh-Yeong; Lin, Chin-Teng

2011-01-01

In the present study, novel dry-contact sensors for measuring electro-encephalography (EEG) signals without any skin preparation are designed, fabricated by an injection molding manufacturing process and experimentally validated. Conventional wet electrodes are commonly used to measure EEG signals; they provide excellent EEG signals subject to proper skin preparation and conductive gel application. However, a series of skin preparation procedures for applying the wet electrodes is always required and usually creates trouble for users. To overcome these drawbacks, novel dry-contact EEG sensors were proposed for potential operation in the presence or absence of hair and without any skin preparation or conductive gel usage. The dry EEG sensors were designed to contact the scalp surface with 17 spring contact probes. Each probe was designed to include a probe head, plunger, spring, and barrel. The 17 probes were inserted into a flexible substrate using a one-time forming process via an established injection molding procedure. With these 17 spring contact probes, the flexible substrate allows for high geometric conformity between the sensor and the irregular scalp surface to maintain low skin-sensor interface impedance. Additionally, the flexible substrate also initiates a sensor buffer effect, eliminating pain when force is applied. The proposed dry EEG sensor was reliable in measuring EEG signals without any skin preparation or conductive gel usage, as compared with the conventional wet electrodes. PMID:22163929

Zirconia based superhydrophobic coatings on cotton fabrics exhibiting excellent durability for versatile use

PubMed Central

Das, Indranee; De, Goutam

2015-01-01

A fluorinated silyl functionalized zirconia was synthesized by the sol-gel method to fabricate an extremely durable superhydrophobic coating on cotton fabrics by simple immersion technique. The fabric surfaces firmly attached with the coating material through covalent bonding, possessed superhydrophobicity with high water contact angle ≈163 ± 1°, low hysteresis ≈3.5° and superoleophilicity. The coated fabrics were effective to separate oil/water mixture with a considerably high separation efficiency of 98.8 wt% through ordinary filtering. Presence of highly stable (chemically and mechanically) superhydrophobic zirconia bonded with cellulose makes such excellent water repelling ability of the fabrics durable under harsh environment conditions like high temperature, strong acidic or alkaline solutions, different organic solvents and mechanical forces including extensive washings. Moreover, these coated fabrics retained self-cleanable superhydrophobic property as well as high water separation efficiency even after several cycles, launderings and abrasions. Therefore, such robust superhydrophobic ZrO2 coated fabrics have strong potential for various industrial productions and uses. PMID:26678754

Synthesis, Characterization and Utility of Carbon Nanotube Based Hybrid Sensors in Bioanalytical Applications

NASA Astrophysics Data System (ADS)

Badhulika, Sushmee

The detection of gaseous analytes and biological molecules is of prime importance in the fields of environmental pollution control, food and water - safety and analysis; and medical diagnostics. This necessitates the development of advanced and improved technology that is reliable, inexpensive and suitable for high volume production. The conventional sensors are often thin film based which lack sensitivity due to the phenomena of current shunting across the charge depleted region when an analyte binds with them. One dimensional (1-D) nanostructures provide a better alternative for sensing applications by eliminating the issue of current shunting due to their 1-D geometries and facilitating device miniaturization and low power operations. Carbon nanotubes (CNTs) are 1-D nanostructures that possess small size, high mechanical strength, high electrical and thermal conductivity and high specific area that have resulted in their wide spread applications in sensor technology. To overcome the issue of low sensitivity of pristine CNTs and to widen their scope, hybrid devices have been fabricated that combine the synergistic properties of CNTs along with materials like metals and conducting polymers (CPs). CPs exhibit electronic, magnetic and optical properties of metals and semiconductors while retaining the processing advantages of polymers. Their high chemical sensitivity, room temperature operation and tunable charge transport properties has made them ideal for use as transducing elements in chemical sensors. In this dissertation, various CNT based hybrid devices such as CNT-conducting polymer and graphene-CNT-metal nanoparticles based sensors have been developed and demonstrated towards bioanalytical applications such as detection of volatile organic compounds (VOCs) and saccharides. Electrochemical polymerization enabled the synthesis of CPs and metal nanoparticles in a simple, cost effective and controlled way on the surface of CNT based platforms thus resulting in

Fabrication of wear-resistant silicon microprobe tips for high-speed surface roughness scanning devices

NASA Astrophysics Data System (ADS)

Wasisto, Hutomo Suryo; Yu, Feng; Doering, Lutz; Völlmeke, Stefan; Brand, Uwe; Bakin, Andrey; Waag, Andreas; Peiner, Erwin

2015-05-01

Silicon microprobe tips are fabricated and integrated with piezoresistive cantilever sensors for high-speed surface roughness scanning systems. The fabrication steps of the high-aspect-ratio silicon microprobe tips were started with photolithography and wet etching of potassium hydroxide (KOH) resulting in crystal-dependent micropyramids. Subsequently, thin conformal wear-resistant layer coating of aluminum oxide (Al2O3) was demonstrated on the backside of the piezoresistive cantilever free end using atomic layer deposition (ALD) method in a binary reaction sequence with a low thermal process and precursors of trimethyl aluminum and water. The deposited Al2O3 layer had a thickness of 14 nm. The captured atomic force microscopy (AFM) image exhibits a root mean square deviation of 0.65 nm confirming the deposited Al2O3 surface quality. Furthermore, vacuum-evaporated 30-nm/200-nm-thick Au/Cr layers were patterned by lift-off and served as an etch mask for Al2O3 wet etching and in ICP cryogenic dry etching. By using SF6/O2 plasma during inductively coupled plasma (ICP) cryogenic dry etching, micropillar tips were obtained. From the preliminary friction and wear data, the developed silicon cantilever sensor has been successfully used in 100 fast measurements of 5- mm-long standard artifact surface with a speed of 15 mm/s and forces of 60-100 μN. Moreover, the results yielded by the fabricated silicon cantilever sensor are in very good agreement with those of calibrated profilometer. These tactile sensors are targeted for use in high-aspect-ratio microform metrology.

Microstrip Patch Sensor for Salinity Determination.

PubMed

Lee, Kibae; Hassan, Arshad; Lee, Chong Hyun; Bae, Jinho

2017-12-18

In this paper, a compact microstrip feed inset patch sensor is proposed for measuring the salinities in seawater. The working principle of the proposed sensor depends on the fact that different salinities in liquid have different relative permittivities and cause different resonance frequencies. The proposed sensor can obtain better sensitivity to salinity changes than common sensors using conductivity change, since the relative permittivity change to salinity is 2.5 times more sensitive than the conductivity change. The patch and ground plane of the proposed sensor are fabricated by conductive copper spray coating on the masks made by 3D printer. The fabricated patch and the ground plane are bonded to a commercial silicon substrate and then attached to 5 mm-high chamber made by 3D printer so that it contains only 1 mL seawater. For easy fabrication and testing, the maximum resonance frequency was selected under 3 GHz and to cover salinities in real seawater, it was assumed that the salinity changes from 20 to 35 ppt. The sensor was designed by the finite element method-based ANSYS high-frequency structure simulator (HFSS), and it can detect the salinity with 0.01 ppt resolution. The designed sensor has a resonance frequency separation of 37.9 kHz and reflection coefficients under -20 dB at the resonant frequencies. The fabricated sensor showed better performance with average frequency separation of 48 kHz and maximum reflection coefficient of -35 dB. By comparing with the existing sensors, the proposed compact and low-cost sensor showed a better detection capability. Therefore, the proposed patch sensor can be utilized in radio frequency (RF) tunable sensors for salinity determination.

Development of Fe-based superconducting wires for liquid-hydrogen level sensors

NASA Astrophysics Data System (ADS)

Ishida, S.; Tsuchiya, Y.; Mawatari, Y.; Eisaki, H.; Nakano, A.; Yoshida, Y.

2017-07-01

We developed liquid-hydrogen (LH2) level sensors with Ba(Fe1-x Co x )2As2 superconducting wires (Co-Ba122 wires) as their detection elements. We fabricated Co-Ba122 wires with different Co concentrations x by using the powder-in-tube method. The superconducting transition temperatures of the wires were successfully controlled in the range of 20-25 K by changing x from 0.06 to 0.10. The resistance-temperature curves of the wires exhibited sharp superconducting transitions with widths of 0.5-1.0 K. In addition, we performed an operation test of the Co-Ba122 level sensors with LH2. Close correspondence between the output resistance and the actual LH2 level was observed for a sensor equipped with x = 0.09 wire, demonstrating that this sensor can accurately measure LH2 levels.

A Highly-Sensitive Picric Acid Chemical Sensor Based on ZnO Nanopeanuts.

PubMed

Ibrahim, Ahmed A; Tiwari, Preeti; Al-Assiri, M S; Al-Salami, A E; Umar, Ahmad; Kumar, Rajesh; Kim, S H; Ansari, Z A; Baskoutas, S

2017-07-13

Herein, we report a facile synthesis, characterization, and electrochemical sensing application of ZnO nanopeanuts synthesized by a simple aqueous solution process and characterized by various techniques in order to confirm the compositional, morphological, structural, crystalline phase, and optical properties of the synthesized material. The detailed characterizations revealed that the synthesized material possesses a peanut-shaped morphology, dense growth, and a wurtzite hexagonal phase along with good crystal and optical properties. Further, to ascertain the useful properties of the synthesized ZnO nanopeanut as an excellent electron mediator, electrochemical sensors were fabricated based on the form of a screen printed electrode (SPE). Electrochemical and current-voltage characteristics were studied for the determination of picric acid sensing characteristics. The electrochemical sensor fabricated based on the SPE technique exhibited a reproducible and reliable sensitivity of ~1.2 μA/mM (9.23 μA·mM -1 ·cm -2 ), a lower limit of detection at 7.8 µM, a regression coefficient ( R ²) of 0.94, and good linearity over the 0.0078 mM to 10.0 mM concentration range. In addition, the sensor response was also tested using simple I-V techniques, wherein a sensitivity of 493.64 μA·mM -1 ·cm -2 , an experimental Limit of detection (LOD) of 0.125 mM, and a linear dynamic range (LDR) of 1.0 mM-5.0 mM were observed for the fabricated picric acid sensor.

A Highly-Sensitive Picric Acid Chemical Sensor Based on ZnO Nanopeanuts

PubMed Central

Ibrahim, Ahmed A.; Tiwari, Preeti; Al-Assiri, M. S.; Al-Salami, A. E.; Umar, Ahmad; Kumar, Rajesh; Kim, S. H.; Ansari, Z. A.; Baskoutas, S.

2017-01-01

Herein, we report a facile synthesis, characterization, and electrochemical sensing application of ZnO nanopeanuts synthesized by a simple aqueous solution process and characterized by various techniques in order to confirm the compositional, morphological, structural, crystalline phase, and optical properties of the synthesized material. The detailed characterizations revealed that the synthesized material possesses a peanut-shaped morphology, dense growth, and a wurtzite hexagonal phase along with good crystal and optical properties. Further, to ascertain the useful properties of the synthesized ZnO nanopeanut as an excellent electron mediator, electrochemical sensors were fabricated based on the form of a screen printed electrode (SPE). Electrochemical and current-voltage characteristics were studied for the determination of picric acid sensing characteristics. The electrochemical sensor fabricated based on the SPE technique exhibited a reproducible and reliable sensitivity of ~1.2 μA/mM (9.23 μA·mM−1·cm−2), a lower limit of detection at 7.8 µM, a regression coefficient (R2) of 0.94, and good linearity over the 0.0078 mM to 10.0 mM concentration range. In addition, the sensor response was also tested using simple I-V techniques, wherein a sensitivity of 493.64 μA·mM−1·cm−2, an experimental Limit of detection (LOD) of 0.125 mM, and a linear dynamic range (LDR) of 1.0 mM–5.0 mM were observed for the fabricated picric acid sensor. PMID:28773151

Through-Layer Buckle Wavelength-Gradient Design for the Coupling of High Sensitivity and Stretchability in a Single Strain Sensor.

PubMed

He, Tengyu; Lin, Chucheng; Shi, Liangjing; Wang, Ranran; Sun, Jing

2018-03-21

Recent years have witnessed a breathtaking development of wearable strain sensors. Coupling high sensitivity and stretchability in a strain sensor is greatly desired by emerging wearable applications but remains a big challenge. To tackle this issue, a through-layer buckle wavelength-gradient design is proposed and a facile and universal fabrication strategy is demonstrated to introduce such a gradient into the sensing film with multilayered sensing units. Following this strategy, strain sensors are fabricated using graphene woven fabrics (GWFs) as sensing units, which exhibit highly tunable electromechanical performances. Specifically, the sensor with 10-layer GWFs has a gauge factor (GF) of 2996 at a maximum strain of 242.74% and an average GF of 327. It also exhibits an extremely low minimum detection limit of 0.02% strain, a fast signal response of less than 90 ms, and a high cyclic durability through more than 10 000 cycling test. Such excellent performances qualify it in accurately monitoring full-range human activities, ranging from subtle stimuli (e.g., pulse, respiration, and voice recognition) to vigorous motions (finger bending, walking, jogging, and jumping). The combination of experimental observations and modeling study shows that the predesigned through-layer buckle wavelength gradient leads to a layer-by-layer crack propagation process, which accounts for the underlying working mechanism. Modeling study shows a great potential for further improvement of sensing performances by adjusting fabrication parameters such as layers of sensing units ( n) and step pre-strain (ε sp ). For one thing, when ε sp is fixed, the maximum sensing strain could be adjusted from >240% ( n = 10) to >450% ( n = 15) and >1200% ( n = 20). For the other, when n is fixed, the maximum sensing strain could be adjusted from >240% (ε sp = 13.2%) to >400% (ε sp = 18%) and >800% (ε sp = 25%).

A supramolecular approach to fabricate highly emissive smart materials

PubMed Central

Liu, Kai; Yao, Yuxing; Kang, Yuetong; Liu, Yu; Han, Yuchun; Wang, Yilin; Li, Zhibo; Zhang, Xi

2013-01-01

The aromatic chromophores, for example, perylene diimides (PDIs) are well known for their desirable absorption and emission properties. However, their stacking nature hinders the exploitation of these properties and further applications. To fabricate emissive aggregates or solid-state materials, it has been common practice to decrease the degree of stacking of PDIs by incorporating substituents into the parent aromatic ring. However, such practice often involves difficultorganic synthesis with multiple steps. A supramolecular approach is established here to fabricate highly fluorescent and responsive soft materials, which has greatly decreases the number of required synthetic steps and also allows for a system with switchable photophysical properties. The highly fluorescent smart material exhibits great adaptivity and can be used as a supramolecular sensor for the rapid detection of spermine with high sensitivity and selectivity, which is crucial for the early diagnosis of malignant tumors. PMID:23917964

Fabrication and characterization of a micromachined swirl-shaped ionic polymer metal composite actuator with electrodes exhibiting asymmetric resistance.

PubMed

Feng, Guo-Hua; Liu, Kim-Min

2014-05-12

This paper presents a swirl-shaped microfeatured ionic polymer-metal composite (IPMC) actuator. A novel micromachining process was developed to fabricate an array of IPMC actuators on a glass substrate and to ensure that no shortcircuits occur between the electrodes of the actuator. We demonstrated a microfluidic scheme in which surface tension was used to construct swirl-shaped planar IPMC devices of microfeature size and investigated the flow velocity of Nafion solutions, which formed the backbone polymer of the actuator, within the microchannel. The unique fabrication process yielded top and bottom electrodes that exhibited asymmetric surface resistance. A tool for measuring surface resistance was developed and used to characterize the resistances of the electrodes for the fabricated IPMC device. The actuator, which featured asymmetric electrode resistance, caused a nonzero-bias current when the device was driven using a zero-bias square wave, and we propose a circuit model to describe this phenomenon. Moreover, we discovered and characterized a bending and rotating motion when the IPMC actuator was driven using a square wave. We observed a strain rate of 14.6% and a displacement of 700 μm in the direction perpendicular to the electrode surfaces during 4.5-V actuation.

Fabrication and Characterization of a Micromachined Swirl-Shaped Ionic Polymer Metal Composite Actuator with Electrodes Exhibiting Asymmetric Resistance

PubMed Central

Feng, Guo-Hua; Liu, Kim-Min

2014-01-01

This paper presents a swirl-shaped microfeatured ionic polymer-metal composite (IPMC) actuator. A novel micromachining process was developed to fabricate an array of IPMC actuators on a glass substrate and to ensure that no shortcircuits occur between the electrodes of the actuator. We demonstrated a microfluidic scheme in which surface tension was used to construct swirl-shaped planar IPMC devices of microfeature size and investigated the flow velocity of Nafion solutions, which formed the backbone polymer of the actuator, within the microchannel. The unique fabrication process yielded top and bottom electrodes that exhibited asymmetric surface resistance. A tool for measuring surface resistance was developed and used to characterize the resistances of the electrodes for the fabricated IPMC device. The actuator, which featured asymmetric electrode resistance, caused a nonzero-bias current when the device was driven using a zero-bias square wave, and we propose a circuit model to describe this phenomenon. Moreover, we discovered and characterized a bending and rotating motion when the IPMC actuator was driven using a square wave. We observed a strain rate of 14.6% and a displacement of 700 μm in the direction perpendicular to the electrode surfaces during 4.5-V actuation. PMID:24824370

Highly sensitive and area-efficient CMOS image sensor using a PMOSFET-type photodetector with a built-in transfer gate

NASA Astrophysics Data System (ADS)

Seo, Sang-Ho; Kim, Kyoung-Do; Kong, Jae-Sung; Shin, Jang-Kyoo; Choi, Pyung

2007-02-01

In this paper, a new CMOS image sensor is presented, which uses a PMOSFET-type photodetector with a transfer gate that has a high and variable sensitivity. The proposed CMOS image sensor has been fabricated using a 0.35 μm 2-poly 4- metal standard CMOS technology and is composed of a 256 × 256 array of 7.05 × 7.10 μm pixels. The unit pixel has a configuration of a pseudo 3-transistor active pixel sensor (APS) with the PMOSFET-type photodetector with a transfer gate, which has a function of conventional 4-transistor APS. The generated photocurrent is controlled by the transfer gate of the PMOSFET-type photodetector. The maximum responsivity of the photodetector is larger than 1.0 × 10 3 A/W without any optical lens. Fabricated 256 × 256 CMOS image sensor exhibits a good response to low-level illumination as low as 5 lux.

Self-powered thin-film motion vector sensor

PubMed Central

Jing, Qingshen; Xie, Yannan; Zhu, Guang; Han, Ray P. S.; Wang, Zhong Lin

2015-01-01

Harnessing random micromeso-scale ambient energy is not only clean and sustainable, but it also enables self-powered sensors and devices to be realized. Here we report a robust and self-powered kinematic vector sensor fabricated using highly pliable organic films that can be bent to spread over curved and uneven surfaces. The device derives its operational energy from a close-proximity triboelectrification of two surfaces: a polytetrafluoroethylene film coated with a two-column array of copper electrodes that constitutes the mover and a polyimide film with the top and bottom surfaces coated with a two-column aligned array of copper electrodes that comprises the stator. During relative reciprocations, the electrodes in the mover generate electric signals of ±5 V to attain a peak power density of ≥65 mW m−2 at a speed of 0.3 ms−1. From our 86,000 sliding motion tests of kinematic measurements, the sensor exhibits excellent stability, repeatability and strong signal durability. PMID:26271603

Highly Stretchable Potentiometric pH Sensor Fabricated via Laser Carbonization and Machining of Carbon-Polyaniline Composite.

PubMed

Rahimi, Rahim; Ochoa, Manuel; Tamayol, Ali; Khalili, Shahla; Khademhosseini, Ali; Ziaie, Babak

2017-03-15

The development of stretchable sensors has recently attracted considerable attention. These sensors have been used in wearable and robotics applications, such as personalized health-monitoring, motion detection, and human-machine interfaces. Herein, we report on a highly stretchable electrochemical pH sensor for wearable point-of-care applications that consists of a pH-sensitive working electrode and a liquid-junction-free reference electrode, in which the stretchable conductive interconnections are fabricated by laser carbonizing and micromachining of a polyimide sheet bonded to an Ecoflex substrate. This method produces highly porous carbonized 2D serpentine traces that are subsequently permeated with polyaniline (PANI) as the conductive filler, binding material, and pH-sensitive membrane. The experimental and simulation results demonstrate that the stretchable serpentine PANI/C-PI interconnections with an optimal trace width of 0.3 mm can withstand elongations of up to 135% and are robust to more than 12 000 stretch-and-release cycles at 20% strain without noticeable change in the resistance. The pH sensor displays a linear sensitivity of -53 mV/pH (r 2 = 0.976) with stable performance in the physiological range of pH 4-10. The sensor shows excellent stability to applied longitudinal and transverse strains up to 100% in different pH buffer solutions with a minimal deviation of less than ±4 mV. The material biocompatibility is confirmed with NIH 3T3 fibroblast cells via PrestoBlue assays.

Bench-Top Fabrication of an All-PDMS Microfluidic Electrochemical Cell Sensor Integrating Micro/Nanostructured Electrodes.

PubMed

Saem, Sokunthearath; Zhu, Yujie; Luu, Helen; Moran-Mirabal, Jose

2017-03-31

In recent years, efforts in the development of lab-on-a-chip (LoC) devices for point-of-care (PoC) applications have increased to bring affordable, portable, and sensitive diagnostics to the patients' bedside. To reach this goal, research has shifted from using traditional microfabrication methods to more versatile, rapid, and low-cost options. This work focuses on the benchtop fabrication of a highly sensitive, fully transparent, and flexible poly (dimethylsiloxane) (PDMS) microfluidic (μF) electrochemical cell sensor. The μF device encapsulates 3D structured gold and platinum electrodes, fabricated using a shape-memory polymer shrinking method, which are used to set up an on-chip electrochemical cell. The PDMS to PDMS-structured electrode bonding protocol to fabricate the μF chip was optimized and found to have sufficient bond strength to withstand up to 100 mL/min flow rates. The sensing capabilities of the on-chip electrochemical cell were demonstrated by using cyclic voltammetry to monitor the adhesion of murine 3T3 fibroblasts in the presence of a redox reporter. The charge transfer across the working electrode was reduced upon cell adhesion, which was used as the detection mechanism, and allowed the detection of as few as 24 cells. The effective utilization of simple and low cost bench-top fabrication methods could accelerate the prototyping and development of LoC technologies and bring PoC diagnostics and personalized medicine to the patients' bedside.

Bench-Top Fabrication of an All-PDMS Microfluidic Electrochemical Cell Sensor Integrating Micro/Nanostructured Electrodes

PubMed Central

Saem, Sokunthearath; Zhu, Yujie; Luu, Helen; Moran-Mirabal, Jose

2017-01-01

In recent years, efforts in the development of lab-on-a-chip (LoC) devices for point-of-care (PoC) applications have increased to bring affordable, portable, and sensitive diagnostics to the patients’ bedside. To reach this goal, research has shifted from using traditional microfabrication methods to more versatile, rapid, and low-cost options. This work focuses on the benchtop fabrication of a highly sensitive, fully transparent, and flexible poly (dimethylsiloxane) (PDMS) microfluidic (μF) electrochemical cell sensor. The μF device encapsulates 3D structured gold and platinum electrodes, fabricated using a shape-memory polymer shrinking method, which are used to set up an on-chip electrochemical cell. The PDMS to PDMS-structured electrode bonding protocol to fabricate the μF chip was optimized and found to have sufficient bond strength to withstand up to 100 mL/min flow rates. The sensing capabilities of the on-chip electrochemical cell were demonstrated by using cyclic voltammetry to monitor the adhesion of murine 3T3 fibroblasts in the presence of a redox reporter. The charge transfer across the working electrode was reduced upon cell adhesion, which was used as the detection mechanism, and allowed the detection of as few as 24 cells. The effective utilization of simple and low cost bench-top fabrication methods could accelerate the prototyping and development of LoC technologies and bring PoC diagnostics and personalized medicine to the patients’ bedside. PMID:28362329

Fabrication and Characterizations of Ethanol Sensor Based on CuO Nanoparticles.

PubMed

Al-Hadeethi, Yas; Umar, Ahmad; Kumar, Rajesh; Al-Heniti, Saleh H; Raffah, Bahaaudin M

2018-04-01

In this paper, we report the synthesis, characterization and ethanol sensing applications of CuO nanoparticles. The CuO nanoparticles were prepared by a facile, low-temperature hydrothermal method and characterized in detail in terms of their structural, morphological, compositional and crystalline properties, through different characterization techniques including X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM) attached with energy dispersive spectroscopy (EDS), and Fourier transform infrared (FTIR) spectroscopy. The detailed studies revealed that the synthesized CuO nanoparticles were well-crystalline and possessed monoclinic crystal structure. The synthesized CuO nanoparticles were utilized for the fabrication of highly sensitive ethanol gas sensor. At an optimized temperature of 320 °C, high sensitivity (Ra/Rg) of 39.29 was observed for 200 ppm of ethanol gas. Additionally, very low response (τres = 14 s) and recovery (τrec = 30 s) times were observed for 100 ppm of ethanol.

Recent Advances in Paper-Based Sensors

PubMed Central

Liana, Devi D.; Raguse, Burkhard; Gooding, J. Justin; Chow, Edith

2012-01-01

Paper-based sensors are a new alternative technology for fabricating simple, low-cost, portable and disposable analytical devices for many application areas including clinical diagnosis, food quality control and environmental monitoring. The unique properties of paper which allow passive liquid transport and compatibility with chemicals/biochemicals are the main advantages of using paper as a sensing platform. Depending on the main goal to be achieved in paper-based sensors, the fabrication methods and the analysis techniques can be tuned to fulfill the needs of the end-user. Current paper-based sensors are focused on microfluidic delivery of solution to the detection site whereas more advanced designs involve complex 3-D geometries based on the same microfluidic principles. Although paper-based sensors are very promising, they still suffer from certain limitations such as accuracy and sensitivity. However, it is anticipated that in the future, with advances in fabrication and analytical techniques, that there will be more new and innovative developments in paper-based sensors. These sensors could better meet the current objectives of a viable low-cost and portable device in addition to offering high sensitivity and selectivity, and multiple analyte discrimination. This paper is a review of recent advances in paper-based sensors and covers the following topics: existing fabrication techniques, analytical methods and application areas. Finally, the present challenges and future outlooks are discussed. PMID:23112667

Fabrication of close-packed TES microcalorimeter arrays using superconducting molybdenum/gold transition-edge sensors

NASA Astrophysics Data System (ADS)

Finkbeiner, F. M.; Brekosky, R. P.; Chervenak, J. A.; Figueroa-Feliciano, E.; Li, M. J.; Lindeman, M. A.; Stahle, C. K.; Stahle, C. M.; Tralshawala, N.

2002-02-01

We present an overview of our efforts in fabricating Transition-Edge Sensor (TES) microcalorimeter arrays for use in astronomical x-ray spectroscopy. Two distinct types of array schemes are currently pursued: 5×5 single pixel TES array where each pixel is a TES microcalorimeter, and Position-Sensing TES (PoST) array. In the latter, a row of 7 or 15 thermally-linked absorber pixels is read out by two TES at its ends. Both schemes employ superconducting Mo/Au bilayers as the TES. The TES are placed on silicon nitride membranes for thermal isolation from the structural frame. The silicon nitride membranes are prepared by a Deep Reactive Ion Etch (DRIE) process into a silicon wafer. In order to achieve the concept of closely packed arrays without decreasing its structural and functional integrity, we have already developed the technology to fabricate arrays of cantilevered pixel-sized absorbers and slit membranes in silicon nitride films. Furthermore, we have started to investigate ultra-low resistance through-wafer micro-vias to bring the electrical contact out to the back of a wafer. .

In-Doped ZnO Hexagonal Stepped Nanorods and Nanodisks as Potential Scaffold for Highly-Sensitive Phenyl Hydrazine Chemical Sensors.

PubMed

Umar, Ahmad; Kim, Sang Hoon; Kumar, Rajesh; Al-Assiri, Mohammad S; Al-Salami, A E; Ibrahim, Ahmed A; Baskoutas, Sotirios

2017-11-21

Herein, we report the growth of In-doped ZnO (IZO) nanomaterials, i.e., stepped hexagonal nanorods and nanodisks by the thermal evaporation process using metallic zinc and indium powders in the presence of oxygen. The as-grown IZO nanomaterials were investigated by several techniques in order to examine their morphological, structural, compositional and optical properties. The detailed investigations confirmed that the grown nanomaterials, i.e., nanorods and nanodisks possess well-crystallinity with wurtzite hexagonal phase and grown in high density. The room-temperature PL spectra exhibited a suppressed UV emissions with strong green emissions for both In-doped ZnO nanomaterials, i.e., nanorods and nanodisks. From an application point of view, the grown IZO nanomaterials were used as a potential scaffold to fabricate sensitive phenyl hydrazine chemical sensors based on the I-V technique. The observed sensitivities of the fabricated sensors based on IZO nanorods and nanodisks were 70.43 μA·mM -1 cm -2 and 130.18 μA·mM -1 cm -2 , respectively. For both the fabricated sensors, the experimental detection limit was 0.5 μM, while the linear range was 0.5 μM-5.0 mM. The observed results revealed that the simply grown IZO nanomaterials could efficiently be used to fabricate highly sensitive chemical sensors.

Complementary Split-Ring Resonator-Loaded Microfluidic Ethanol Chemical Sensor.

PubMed

Salim, Ahmed; Lim, Sungjoon

2016-10-28

In this paper, a complementary split-ring resonator (CSRR)-loaded patch is proposed as a microfluidic ethanol chemical sensor. The primary objective of this chemical sensor is to detect ethanol's concentration. First, two tightly coupled concentric CSRRs loaded on a patch are realized on a Rogers RT/Duroid 5870 substrate, and then a microfluidic channel engraved on polydimethylsiloxane (PDMS) is integrated for ethanol chemical sensor applications. The resonant frequency of the structure before loading the microfluidic channel is 4.72 GHz. After loading the microfluidic channel, the 550 MHz shift in the resonant frequency is ascribed to the dielectric perturbation phenomenon when the ethanol concentration is varied from 0% to 100%. In order to assess the sensitivity range of our proposed sensor, various concentrations of ethanol are tested and analyzed. Our proposed sensor exhibits repeatability and successfully detects 10% ethanol as verified by the measurement set-up. It has created headway to a miniaturized, non-contact, low-cost, reliable, reusable, and easily fabricated design using extremely small liquid volumes.

Complementary Split-Ring Resonator-Loaded Microfluidic Ethanol Chemical Sensor

PubMed Central

Salim, Ahmed; Lim, Sungjoon

2016-01-01

In this paper, a complementary split-ring resonator (CSRR)-loaded patch is proposed as a microfluidic ethanol chemical sensor. The primary objective of this chemical sensor is to detect ethanol’s concentration. First, two tightly coupled concentric CSRRs loaded on a patch are realized on a Rogers RT/Duroid 5870 substrate, and then a microfluidic channel engraved on polydimethylsiloxane (PDMS) is integrated for ethanol chemical sensor applications. The resonant frequency of the structure before loading the microfluidic channel is 4.72 GHz. After loading the microfluidic channel, the 550 MHz shift in the resonant frequency is ascribed to the dielectric perturbation phenomenon when the ethanol concentration is varied from 0% to 100%. In order to assess the sensitivity range of our proposed sensor, various concentrations of ethanol are tested and analyzed. Our proposed sensor exhibits repeatability and successfully detects 10% ethanol as verified by the measurement set-up. It has created headway to a miniaturized, non-contact, low-cost, reliable, reusable, and easily fabricated design using extremely small liquid volumes. PMID:27801842

Fabrication of multiwall carbon nanotube sheet based hydrogen sensor on a stacking multi-layer structure.

PubMed

Yan, Keyi; Toku, Yuhki; Morita, Yasuyuki; Ju, Yang

2018-06-22

In this research, we propose a new simple method to fabricate hydrogen gas sensor by stacking the multiwall carbon nanotube (MWCNT) sheets. MWCNT sheet offers a larger surface area and more CNT contacts, which are key factors for gas sensing, because of its super-high alignment and end-to-end structure comparing to the traditional CNT film. Besides, MWCNT sheet can be directly drawn from the spinnable CNT array in large scales. Therefore, this method is a potential answer for the mass production and commercialization of CNT based sensor with high response. By stacking different layers of sheet, microstructure and CNT interactions in the layers were changed and their influences towards gas sensing were investigated. It was observed that the sample with 3 layers of sheet and functionalized with 3 nm-thick Pd showed the best gas sensing performance with a response of 12.31% at 4% H2 and response time below 200 s. © 2018 IOP Publishing Ltd.

Highly sensitive refractive index fiber inline Mach-Zehnder interferometer fabricated by femtosecond laser micromachining and chemical etching

NASA Astrophysics Data System (ADS)

Sun, Xiao-Yan; Chu, Dong-Kai; Dong, Xin-Ran; Zhou, Chu; Li, Hai-Tao; Luo-Zhi; Hu, You-Wang; Zhou, Jian-Ying; Cong-Wang; Duan, Ji-An

2016-03-01

A High sensitive refractive index (RI) sensor based on Mach-Zehnder interferometer (MZI) in a conventional single-mode optical fiber is proposed, which is fabricated by femtosecond laser transversal-scanning inscription method and chemical etching. A rectangular cavity structure is formed in part of fiber core and cladding interface. The MZI sensor shows excellent refractive index sensitivity and linearity, which exhibits an extremely high RI sensitivity of -17197 nm/RIU (refractive index unit) with the linearity of 0.9996 within the refractive index range of 1.3371-1.3407. The experimental results are consistent with theoretical analysis.

Fabrication and optimization of a conducting polymer sensor array using stored grain model volatiles.

PubMed

Hossain, Md Eftekhar; Rahman, G M Aminur; Freund, Michael S; Jayas, Digvir S; White, Noel D G; Shafai, Cyrus; Thomson, Douglas J

2012-03-21

During storage, grain can experience significant degradation in quality due to a variety of physical, chemical, and biological interactions. Most commonly, these losses are associated with insects or fungi. Continuous monitoring and an ability to differentiate between sources of spoilage are critical for rapid and effective intervention to minimize deterioration or losses. Therefore, there is a keen interest in developing a straightforward, cost-effective, and efficient method for monitoring of stored grain. Sensor arrays are currently used for classifying liquors, perfumes, and the quality of food products by mimicking the mammalian olfactory system. The use of this technology for monitoring of stored grain and identification of the source of spoilage is a new application, which has the potential for broad impact. The main focus of the work described herein is on the fabrication and optimization of a carbon black (CB) polymer sensor array to monitor stored grain model volatiles associated with insect secretions (benzene derivatives) and fungi (aliphatic hydrocarbon derivatives). Various methods of statistical analysis (RSD, PCA, LDA, t test) were used to select polymers for the array that were optimum for distinguishing between important compound classes (quinones, alcohols) and to minimize the sensitivity for other parameters such as humidity. The performance of the developed sensor array was satisfactory to demonstrate identification and separation of stored grain model volatiles at ambient conditions.

ZnO nanorod arrays and direct wire bonding on GaN surfaces for rapid fabrication of antireflective, high-temperature ultraviolet sensors

NASA Astrophysics Data System (ADS)

So, Hongyun; Senesky, Debbie G.

2016-11-01

Rapid, cost-effective, and simple fabrication/packaging of microscale gallium nitride (GaN) ultraviolet (UV) sensors are demonstrated using zinc oxide nanorod arrays (ZnO NRAs) as an antireflective layer and direct bonding of aluminum wires to the GaN surface. The presence of the ZnO NRAs on the GaN surface significantly reduced the reflectance to less than 1% in the UV and 4% in the visible light region. As a result, the devices fabricated with ZnO NRAs and mechanically stable aluminum bonding wires (pull strength of 3-5 gf) showed higher sensitivity (136.3% at room temperature and 148.2% increase at 250 °C) when compared with devices with bare (uncoated) GaN surfaces. In addition, the devices demonstrated reliable operation at high temperatures up to 300 °C, supporting the feasibility of simple and cost-effective UV sensors operating with higher sensitivity in high-temperature conditions, such as in combustion, downhole, and space exploration applications.

Fabrication of multilayered conductive polymer structures via selective visible light photopolymerization

NASA Astrophysics Data System (ADS)

Cullen, Andrew T.; Price, Aaron D.

2017-04-01

Electropolymerization of pyrrole is commonly employed to fabricate intrinsically conductive polymer films that exhibit desirable electromechanical properties. Due to their monolithic nature, electroactive polypyrrole films produced via this process are typically limited to simple linear or bending actuation modes, which has hindered their application in complex actuation tasks. This initiative aims to develop the specialized fabrication methods and polymer formulations required to realize three-dimensional conductive polymer structures capable of more elaborate actuation modes. Our group has previously reported the application of the digital light processing additive manufacturing process for the fabrication of three-dimensional conductive polymer structures using ultraviolet radiation. In this investigation, we further expand upon this initial work and present an improved polymer formulation designed for digital light processing additive manufacturing using visible light. This technology enables the design of novel electroactive polymer sensors and actuators with enhanced capabilities and brings us one step closer to realizing more advanced electroactive polymer enabled devices.

Novel nanostructured oxygen sensor

NASA Astrophysics Data System (ADS)

Boardman, Alan James

New government regulations and industry requirements for medical oxygen sensors require the development of alternate materials and process optimization of primary sensor components. Current oxygen sensors are not compliant with the Restriction of Hazardous Substances (RoHS) Directive. This work focused on two areas. First, was finding suitable readily available materials for the sensor anodes. Second was optimizing the processing of the sensor cathode membrane for reduced delamination. Oxygen sensors were made using tin (Sn) and bismuth (Bi) electrodes, potassium hydroxide (KOH) and acetic acid (CH3COOH) electrolytes with platinum (Pt) and gold (Au) reference electrodes. Bi electrodes were fabricated by casting and pressing processes. Electrochemical characterization of the Sn and Bi electrodes was performed by Cyclic Voltammetry (CV), Electrochemical Impedance Spectroscopy (EIS) and sensing characterization per BSEN ISO 21647:2009 at various oxygen percentages, 0%, 20.9% and 100% oxygen levels with an automated test apparatus. The Sn anode with both electrolyte solutions showed good oxygen sensing properties and performance in a sensor. This system shows promise for replacement of Pb electrodes as required by the RoHS Directive. The Bi anode with Au cathode in both KOH and CH3COOH electrolytes showed acceptable performance and oxygen sensing properties. The Bi anodes fabricated by separate manufacturing methods demonstrated effectiveness for use in medical oxygen sensors. Gold thin films were prepared by magnetron sputtering on Flouroethylene Polymer (FEP) films. The FEP substrate temperature ranged from -77°C to 50°C. X-Ray Diffraction (XRD) and 4-point resistivity characterized the effects of substrate temperature to Au thin film particle size. XRD peak broadening and resistivity measurements showed a strong correlation of particle size to FEP substrate temperature. Particle size at 50°C was 594A and the -77°C particle size was 2.4 x 103A. Substrate

Review of Recent Metamaterial Microfluidic Sensors

PubMed Central

Salim, Ahmed

2018-01-01

Metamaterial elements/arrays exhibit a sensitive response to fluids yet with a small footprint, therefore, they have been an attractive choice to realize various sensing devices when integrated with microfluidic technology. Micro-channels made from inexpensive biocompatible materials avoid any contamination from environment and require only microliter–nanoliter sample for sensing. Simple design, easy fabrication process, light weight prototype, and instant measurements are advantages as compared to conventional (optical, electrochemical and biological) sensing systems. Inkjet-printed flexible sensors find their utilization in rapidly growing wearable electronics and health-monitoring flexible devices. Adequate sensitivity and repeatability of these low profile microfluidic sensors make them a potential candidate for point-of-care testing which novice patients can use reliably. Aside from degraded sensitivity and lack of selectivity in all practical microwave chemical sensors, they require an instrument, such as vector network analyzer for measurements and not readily available as a self-sustained portable sensor. This review article presents state-of-the-art metamaterial inspired microfluidic bio/chemical sensors (passive devices ranging from gigahertz to terahertz range) with an emphasis on metamaterial sensing circuit and microfluidic detection. We also highlight challenges and strategies to cope these issues which set future directions. PMID:29342953

Smart bi-metallic perovskite nanofibers as selective and reusable sensors of nano-level concentrations of non-steroidal anti-inflammatory drugs.

PubMed

Mohamed, Mona A; Hasan, Menna M; Abdullah, Ibrahim H; Abdellah, Ahmed M; Yehia, Ali M; Ahmed, Nashaat; Abbas, Walaa; Allam, Nageh K

2018-08-01

A strategy for trace-level carbon-based electrochemical sensors is investigated via exploring the interesting properties of BaNb 2 O 6 nanofibers (NFs). Utilizing adsorptive stripping square wave voltammetry (ASSWV), an electrochemical sensing platform was developed based on BaNb 2 O 6 nanofibers-modified carbon paste electrode (CPE) for the sensitive detection of lornoxicam (LOR). Different techniques were used to characterize the fabricated BaNb 2 O 6 perovskite NFs. The obtained data show the feasibility to electro-oxidize LOR and paracetamol (PAR) on the surface of the fabricated sensor. The amount of nanofiber and testing conditions were optimized using response surface methodology and ASSWV technique. The optimized BaNb 2 O 6 /CPE sensor exhibits low detection limit of 6.39 × 10 -10 mol L -1 , even in the presence of the co-formulated drug paracetamol (PAR). The sensor was successfully applied for biological applications. Copyright © 2018 Elsevier B.V. All rights reserved.

Gas Sensors Based on Tin Oxide Nanoparticles Synthesized from a Mini-Arc Plasma Source

DOE PAGES

Lu, Ganhua; Huebner, Kyle L.; Ocola, Leonidas E.; ...

2006-01-01

Minimore » aturized gas sensors or electronic noses to rapidly detect and differentiate trace amount of chemical agents are extremely attractive. In this paper, we report on the fabrication and characterization of a functional tin oxide nanoparticle gas sensor. Tin oxide nanoparticles are first synthesized using a convenient and low-cost mini-arc plasma source. The nanoparticle size distribution is measured online using a scanning electrical mobility spectrometer (SEMS). The product nanoparticles are analyzed ex-situ by high resolution transmission electron microscopy (HRTEM) for morphology and defects, energy dispersive X-ray (EDX) spectroscopy for elemental composition, electron diffraction for crystal structure, and X-ray photoelectron spectroscopy (XPS) for surface composition. Nonagglomerated rutile tin oxide ( SnO 2 ) nanoparticles as small as a few nm have been produced. Larger particles bear a core-shell structure with a metallic core and an oxide shell. The nanoparticles are then assembled onto an e-beam lithographically patterned interdigitated electrode using electrostatic force to fabricate the gas sensor. The nanoparticle sensor exhibits a fast response and a good sensitivity when exposed to 100 ppm ethanol vapor in air.« less

Disposable Screen Printed Electrochemical Sensors: Tools for Environmental Monitoring

PubMed Central

Hayat, Akhtar; Marty, Jean Louis

2014-01-01

Screen printing technology is a widely used technique for the fabrication of electrochemical sensors. This methodology is likely to underpin the progressive drive towards miniaturized, sensitive and portable devices, and has already established its route from “lab-to-market” for a plethora of sensors. The application of these sensors for analysis of environmental samples has been the major focus of research in this field. As a consequence, this work will focus on recent important advances in the design and fabrication of disposable screen printed sensors for the electrochemical detection of environmental contaminants. Special emphasis is given on sensor fabrication methodology, operating details and performance characteristics for environmental applications. PMID:24932865

Wireless sensor platform

DOE Office of Scientific and Technical Information (OSTI.GOV)

Joshi, Pooran C.; Killough, Stephen M.; Kuruganti, Phani Teja

A wireless sensor platform and methods of manufacture are provided. The platform involves providing a plurality of wireless sensors, where each of the sensors is fabricated on flexible substrates using printing techniques and low temperature curing. Each of the sensors can include planar sensor elements and planar antennas defined using the printing and curing. Further, each of the sensors can include a communications system configured to encode the data from the sensors into a spread spectrum code sequence that is transmitted to a central computer(s) for use in monitoring an area associated with the sensors.

Fabrication method for a room temperature hydrogen sensor

NASA Technical Reports Server (NTRS)

Shukla, Satyajit V. (Inventor); Cho, Hyoung (Inventor); Seal, Sudipta (Inventor); Ludwig, Lawrence (Inventor)

2011-01-01

A sensor for selectively determining the presence and measuring the amount of hydrogen in the vicinity of the sensor. The sensor comprises a MEMS device coated with a nanostructured thin film of indium oxide doped tin oxide with an over layer of nanostructured barium cerate with platinum catalyst nanoparticles. Initial exposure to a UV light source, at room temperature, causes burning of organic residues present on the sensor surface and provides a clean surface for sensing hydrogen at room temperature. A giant room temperature hydrogen sensitivity is observed after making the UV source off. The hydrogen sensor of the invention can be usefully employed for the detection of hydrogen in an environment susceptible to the incursion or generation of hydrogen and may be conveniently used at room temperature.

Low-Cost Fiber Optic Pressure Sensor

DOEpatents

Sheem, Sang K.

2004-05-18

The size and cost of fabricating fiber optic pressure sensors is reduced by fabricating the membrane of the sensor in a non-planar shape. The design of the sensors may be made in such a way that the non-planar membrane becomes a part of an air-tight cavity, so as to make the membrane resilient due to the air-cushion effect of the air-tight cavity. Such non-planar membranes are easier to make and attach.

Low-Cost Fiber Optic Pressure Sensor

DOEpatents

Sheem, Sang K.

2003-07-22

The size and cost of fabricating fiber optic pressure sensors is reduced by fabricating the membrane of the sensor in a non-planar shape. The design of the sensors may be made in such a way that the non-planar membrane becomes a part of an air-tight cavity, so as to make the membrane resilient due to the air-cushion effect of the air-tight cavity. Such non-planar membranes are easier to make and attach.

Highly Sensitive and Ultrastable Skin Sensors for Biopressure and Bioforce Measurements Based on Hierarchical Microstructures.

PubMed

Sun, Qi-Jun; Zhuang, Jiaqing; Venkatesh, Shishir; Zhou, Ye; Han, Su-Ting; Wu, Wei; Kong, Ka-Wai; Li, Wen-Jung; Chen, Xianfeng; Li, Robert K Y; Roy, Vellaisamy A L

2018-01-31

Piezoresistive microsensors are considered to be essential components of the future wearable electronic devices. However, the expensive cost, complex fabrication technology, poor stability, and low yield have limited their developments for practical applications. Here, we present a cost-effective, relatively simple, and high-yield fabrication approach to construct highly sensitive and ultrastable piezoresistive sensors using a bioinspired hierarchically structured graphite/polydimethylsiloxane composite as the active layer. In this fabrication, a commercially available sandpaper is employed as the mold to develop the hierarchical structure. Our devices exhibit fascinating performance including an ultrahigh sensitivity (64.3 kPa -1 ), fast response time (<8 ms), low limit of detection of 0.9 Pa, long-term durability (>100 000 cycles), and high ambient stability (>1 year). The applications of these devices in sensing radial artery pulses, acoustic vibrations, and human body motion are demonstrated, exhibiting their enormous potential use in real-time healthcare monitoring and robotic tactile sensing.

Piezoresistive Sensor with High Elasticity Based on 3D Hybrid Network of Sponge@CNTs@Ag NPs.

PubMed

Zhang, Hui; Liu, Nishuang; Shi, Yuling; Liu, Weijie; Yue, Yang; Wang, Siliang; Ma, Yanan; Wen, Li; Li, Luying; Long, Fei; Zou, Zhengguang; Gao, Yihua

2016-08-31

Pressure sensors with high elasticity are in great demand for the realization of intelligent sensing, but there is a need to develope a simple, inexpensive, and scalable method for the manufacture of the sensors. Here, we reported an efficient, simple, facile, and repeatable "dipping and coating" process to manufacture a piezoresistive sensor with high elasticity, based on homogeneous 3D hybrid network of carbon nanotubes@silver nanoparticles (CNTs@Ag NPs) anchored on a skeleton sponge. Highly elastic, sensitive, and wearable sensors are obtained using the porous structure of sponge and the synergy effect of CNTs/Ag NPs. Our sensor was also tested for over 2000 compression-release cycles, exhibiting excellent elasticity and cycling stability. Sensors with high performance and a simple fabrication process are promising devices for commercial production in various electronic devices, for example, sport performance monitoring and man-machine interfaces.

A Flexible Optical pH Sensor Based on Polysulfone Membranes Coated with pH-Responsive Polyaniline Nanofibers.

PubMed

Abu-Thabit, Nedal; Umar, Yunusa; Ratemi, Elaref; Ahmad, Ayman; Ahmad Abuilaiwi, Faraj

2016-06-27

A new optical pH sensor based on polysulfone (PSU) and polyaniline (PANI) was developed. A transparent and flexible PSU membrane was employed as a support. The electrically conductive and pH-responsive PANI was deposited onto the membrane surface by in situ chemical oxidative polymerization (COP). The absorption spectra of the PANI-coated PSU membranes exhibited sensitivity to pH changes in the range of 4-12, which allowed for designing a dual wavelength pH optical sensor. The performance of the membranes was assessed by measuring their response starting from high pH and going down to low pH, and vice versa. It was found that it is necessary to precondition the sensor layers before each measurement due to the slight hysteresis observed during forward and backward pH titrations. PSU membranes with polyaniline coating thicknesses in the range of ≈100-200 nm exhibited fast response times of <4 s, which are attributed to the porous, rough and nanofibrillar morphology of the polyaniline coating. The fabricated pH sensor was characterized by a sigmoidal response (R² = 0.997) which allows for pH determination over a wide dynamic range. All membranes were stable for a period of more than six months when stored in 1 M HCl solution. The reproducibility of the fabricated optical pH sensors was found to be <0.02 absorption units after one month storage in 1 M HCl solution. The performance of the optical pH sensor was tested and the obtained pH values were compared with the results obtained using a pH meter device.

A Flexible Optical pH Sensor Based on Polysulfone Membranes Coated with pH-Responsive Polyaniline Nanofibers

PubMed Central

Abu-Thabit, Nedal; Umar, Yunusa; Ratemi, Elaref; Ahmad, Ayman; Ahmad Abuilaiwi, Faraj

2016-01-01

A new optical pH sensor based on polysulfone (PSU) and polyaniline (PANI) was developed. A transparent and flexible PSU membrane was employed as a support. The electrically conductive and pH-responsive PANI was deposited onto the membrane surface by in situ chemical oxidative polymerization (COP). The absorption spectra of the PANI-coated PSU membranes exhibited sensitivity to pH changes in the range of 4–12, which allowed for designing a dual wavelength pH optical sensor. The performance of the membranes was assessed by measuring their response starting from high pH and going down to low pH, and vice versa. It was found that it is necessary to precondition the sensor layers before each measurement due to the slight hysteresis observed during forward and backward pH titrations. PSU membranes with polyaniline coating thicknesses in the range of ≈100–200 nm exhibited fast response times of <4 s, which are attributed to the porous, rough and nanofibrillar morphology of the polyaniline coating. The fabricated pH sensor was characterized by a sigmoidal response (R2 = 0.997) which allows for pH determination over a wide dynamic range. All membranes were stable for a period of more than six months when stored in 1 M HCl solution. The reproducibility of the fabricated optical pH sensors was found to be <0.02 absorption units after one month storage in 1 M HCl solution. The performance of the optical pH sensor was tested and the obtained pH values were compared with the results obtained using a pH meter device. PMID:27355953

Vibration sensors

NASA Astrophysics Data System (ADS)

Gupta, Amita; Singh, Ranvir; Ahmad, Amir; Kumar, Mahesh

2003-10-01

Today, vibration sensors with low and medium sensitivities are in great demand. Their applications include robotics, navigation, machine vibration monitoring, isolation of precision equipment & activation of safety systems e.g. airbags in automobiles. Vibration sensors have been developed at SSPL, using silicon micromachining to sense vibrations in a system in the 30 - 200 Hz frequency band. The sensing element in the silicon vibration sensor is a seismic mass suspended by thin silicon hinges mounted on a metallized glass plate forming a parallel plate capacitor. The movement of the seismic mass along the vertical axis is monitored to sense vibrations. This is obtained by measuring the change in capacitance. The movable plate of the parallel plate capacitor is formed by a block connected to a surrounding frame by four cantilever beams located on sides or corners of the seismic mass. This element is fabricated by silicon micromachining. Several sensors in the chip sizes 1.6 cm x 1.6 cm, 1 cm x 1 cm and 0.7 cm x 0.7 cm have been fabricated. Work done on these sensors, techniques used in processing and silicon to glass bonding are presented in the paper. Performance evaluation of these sensors is also discussed.

Bio-Inspired Micromechanical Directional Acoustic Sensor

NASA Astrophysics Data System (ADS)

Swan, William; Alves, Fabio; Karunasiri, Gamani

Conventional directional sound sensors employ an array of spatially separated microphones and the direction is determined using arrival times and amplitudes. In nature, insects such as the Ormia ochracea fly can determine the direction of sound using a hearing organ much smaller than the wavelength of sound it detects. The fly's eardrums are mechanically coupled, only separated by about 1 mm, and have remarkable directional sensitivity. A micromechanical sensor based on the fly's hearing system was designed and fabricated on a silicon on insulator (SOI) substrate using MEMS technology. The sensor consists of two 1 mm2 wings connected using a bridge and to the substrate using two torsional legs. The dimensions of the sensor and material stiffness determine the frequency response of the sensor. The vibration of the wings in response to incident sound at the bending resonance was measured using a laser vibrometer and found to be about 1 μm/Pa. The electronic response of the sensor to sound was measured using integrated comb finger capacitors and found to be about 25 V/Pa. The fabricated sensors showed good directional sensitivity. In this talk, the design, fabrication and characteristics of the directional sound sensor will be described. Supported by ONR and TDSI.

Stretchable Array of Highly Sensitive Pressure Sensors Consisting of Polyaniline Nanofibers and Au-Coated Polydimethylsiloxane Micropillars.

PubMed

Park, Heun; Jeong, Yu Ra; Yun, Junyeong; Hong, Soo Yeong; Jin, Sangwoo; Lee, Seung-Jung; Zi, Goangseup; Ha, Jeong Sook

2015-10-27

We report on the facile fabrication of a stretchable array of highly sensitive pressure sensors. The proposed pressure sensor consists of the top layer of Au-deposited polydimethylsiloxane (PDMS) micropillars and the bottom layer of conductive polyaniline nanofibers on a polyethylene terephthalate substrate. The sensors are operated by the changes in contact resistance between Au-coated micropillars and polyaniline according to the varying pressure. The fabricated pressure sensor exhibits a sensitivity of 2.0 kPa(-1) in the pressure range below 0.22 kPa, a low detection limit of 15 Pa, a fast response time of 50 ms, and high stability over 10000 cycles of pressure loading/unloading with a low operating voltage of 1.0 V. The sensor is also capable of noninvasively detecting human-pulse waveforms from carotid and radial artery. A 5 × 5 array of the pressure sensors on the deformable substrate, which consists of PDMS islands for sensors and the mixed thin film of PDMS and Ecoflex with embedded liquid metal interconnections, shows stable sensing of pressure under biaxial stretching by 15%. The strain distribution obtained by the finite element method confirms that the maximum strain applied to the pressure sensor in the strain-suppressed region is less than 0.04% under a 15% biaxial strain of the unit module. This work demonstrates the potential application of our proposed stretchable pressure sensor array for wearable and artificial electronic skin devices.

Nanostructured Gas Sensors for Health Care: An Overview

PubMed Central

Kaushik, Ajeet; Kumar, Rajesh; Jayant, Rahul Dev; Nair, Madhavan

2015-01-01

Nanostructured platforms have been utilized for fabrication of small, sensitive and reliable gas sensing devices owing to high functionality, enhanced charge transport and electro-catalytic property. As a result of globalization, rapid, sensitive and selective detection of gases in environment is essential for health care and security. Nonmaterial such as metal, metal oxides, organic polymers, and organic-inorganic hybrid nanocomposites exhibit interesting optical, electrical, magnetic and molecular properties, and hence are found potential gas sensing materials. Morphological, electrical, and optical properties of such nanostructures can be tailored via controlling the precursor concentration and synthesis conditions resulting to achieve desired sensing. This review presents applications of nano-enabling gas sensors to detect gases for environment monitoring. The recent update, challenges, and future vision for commercial applications of such sensor are also described here. PMID:26491544

Fabrication of demultiplexer for T bps optical signals by using spincoated squarylium dye J-aggregates exhibiting femtosecond optical response

NASA Astrophysics Data System (ADS)

Iwasa, Izumi; Furuki, Makoto; Tian, Minquan; Sato, Yasuhiro; Pu, Lyong S.; Tatsuura, Setoshi; Wada, Osamu

2001-06-01

We fabricated spincoated films of squarylium dye (SQ) J- aggregates exhibiting femtosecond optical response at room temperature. Optical dynamics measurements revealed that the saturable absorption of the SQ J-aggregates film exhibited a decay time of less than 100 fs at a pump energy of 80 fJ/micrometer2. With this ultrafast SQ optical film, four- output demultiplex operation for T bps pulses was demonstrated. A series of 4 optical pulses with 100 fs duration and 1 ps interval (corresponding to 1 T bps signals) were irradiated onto the SQ film synchronized with a 100 fs gate pulse at a finite angle. Four demultiplexed signals were clearly observed at different areas on the CCD camera. Multi- output serial-to-parallel demultiplexer for T bps optical signals can be formed using the SQ J-aggregates film.

Flexible Strain Sensor Based on Layer-by-Layer Self-Assembled Graphene/Polymer Nanocomposite Membrane and Its Sensing Properties

NASA Astrophysics Data System (ADS)

Zhang, Dongzhi; Jiang, Chuanxing; Tong, Jun; Zong, Xiaoqi; Hu, Wei

2018-04-01

Graphene is a potential building block for next generation electronic devices including field-effect transistors, chemical sensors, and radio frequency switches. Investigations of strain application of graphene-based films have emerged in recent years, but the challenges in synthesis and processing achieving control over its fabrication constitute the main obstacles towards device applications. This work presents an alternative approach, layer-by-layer self-assembly, allowing a controllable fabrication of graphene/polymer film strain sensor on flexible substrates of polyimide with interdigital electrodes. Carboxylated graphene and poly (diallyldimethylammonium chloride) (PDDA) were exploited to form hierarchical nanostructure due to electrostatic action. The morphology and structure of the film were inspected by using scanning electron microscopy, x-ray diffraction and Fourier transform infrared spectroscopy. The strain-sensing properties of the graphene/PDDA film sensor were investigated through tuning micrometer caliper exertion and a PC-assisted piezoresistive measurement system. Experimental result shows that the sensor exhibited not only excellent response and reversibility behavior as a function of deflection, but also good repeatability and acceptable linearity. The strain-sensing mechanism of the proposed sensor was attributed to the electrical resistance change resulted from piezoresistive effect.

Fabrication of Ultra-Thin Printed Organic TFT CMOS Logic Circuits Optimized for Low-Voltage Wearable Sensor Applications.

PubMed

Takeda, Yasunori; Hayasaka, Kazuma; Shiwaku, Rei; Yokosawa, Koji; Shiba, Takeo; Mamada, Masashi; Kumaki, Daisuke; Fukuda, Kenjiro; Tokito, Shizuo

2016-05-09

Ultrathin electronic circuits that can be manufactured by using conventional printing technologies are key elements necessary to realize wearable health sensors and next-generation flexible electronic devices. Due to their low level of power consumption, complementary (CMOS) circuits using both types of semiconductors can be easily employed in wireless devices. Here, we describe ultrathin CMOS logic circuits, for which not only the source/drain electrodes but also the semiconductor layers were printed. Both p-type and n-type organic thin film transistor devices were employed in a D-flip flop circuit in the newly developed stacked structure and exhibited excellent electrical characteristics, including good carrier mobilities of 0.34 and 0.21 cm(2) V(-1) sec(-1), and threshold voltages of nearly 0 V with low operating voltages. These printed organic CMOS D-flip flop circuits exhibit operating frequencies of 75 Hz and demonstrate great potential for flexible and printed electronics technology, particularly for wearable sensor applications with wireless connectivity.

Fabrication of Ultra-Thin Printed Organic TFT CMOS Logic Circuits Optimized for Low-Voltage Wearable Sensor Applications

PubMed Central

Takeda, Yasunori; Hayasaka, Kazuma; Shiwaku, Rei; Yokosawa, Koji; Shiba, Takeo; Mamada, Masashi; Kumaki, Daisuke; Fukuda, Kenjiro; Tokito, Shizuo

2016-01-01

Ultrathin electronic circuits that can be manufactured by using conventional printing technologies are key elements necessary to realize wearable health sensors and next-generation flexible electronic devices. Due to their low level of power consumption, complementary (CMOS) circuits using both types of semiconductors can be easily employed in wireless devices. Here, we describe ultrathin CMOS logic circuits, for which not only the source/drain electrodes but also the semiconductor layers were printed. Both p-type and n-type organic thin film transistor devices were employed in a D-flip flop circuit in the newly developed stacked structure and exhibited excellent electrical characteristics, including good carrier mobilities of 0.34 and 0.21 cm2 V−1 sec−1, and threshold voltages of nearly 0 V with low operating voltages. These printed organic CMOS D-flip flop circuits exhibit operating frequencies of 75 Hz and demonstrate great potential for flexible and printed electronics technology, particularly for wearable sensor applications with wireless connectivity. PMID:27157914

Highly selective room temperature NO2 gas sensor based on rGO-ZnO composite

NASA Astrophysics Data System (ADS)

Jyoti, Kanaujiya, Neha; Varma, G. D.

2018-05-01

Blending metal oxide nanoparticles with graphene or its derivatives can greatly enhance gas sensing characteristics. In the present work, ZnO nanoparticles have been synthesized via reflux method. Thin films of reduced graphene oxide (rGO) and composite of rGO-ZnO have been fabricated by drop casting method for gas sensing application. The samples have been characterized by X-ray diffraction (XRD) and Field-emission scanning electron microscope (FESEM) for the structural and morphological studies respectively. Sensing measurements have been carried out for the composite film of rGO-ZnO for different concentrations of NO2 ranging from 4 to 100 ppm. Effect of increasing temperature on the sensing performance has also been studied and the rGO-ZnO composite sensor shows maximum percentage response at room temperature. The limit of detection (LOD) for rGO-ZnO composite sensor is 4ppm and it exhibits a high response of 48.4% for 40 ppm NO2 at room temperature. To check the selectivity of the composite sensor, sensor film has been exposed to 40 ppm different gases like CO, NH3, H2S and Cl2 at room temperature and the sensor respond negligibly to these gases. The present work suggests that rGO-ZnO composite material can be a better candidate for fabrication of highly selective room temperature NO2 gas sensor.

Investigation on Smart Parts with Embedded Piezoelectric Sensors via Additive Manufacturing

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lin, Yirong

The goal of this proposed research is to design, fabricate, and evaluate “smart parts” with embedded sensors for energy systems. The “smart parts” will be fabricated using Electron Beam Melting (EBM) 3D printing technique with built-in piezoceramic sensors. The objectives of the proposed project are: 1) Fabricate energy system related components with embedded sensors, 2) Evaluate the mechanical properties and sensing functionalities of the “smart parts” with embedded piezoceramic sensors, and 3) Assess in-situ sensing capability of energy system parts. The second year’s research of the research is centered on fabrication of the “smart parts” with considerations of overall materialmore » property as well as demonstration of sensing functionalities. The results for the final report are presented here, including all research accomplishment, project management. Details are included such as: how the design and fabrication of sensor packaging could improve the sensor performance, demonstration of “smart parts” sensing capabilities, analysis on the elements that constitute the “smart sensors”, advanced “stop and go” fabrication process, smart injector fabrication using SLM technology, smart injector testing in combustion environments etc. Research results to date have generated several posters and papers.« less

Modeling, fabrication and plasma actuator coupling of flexible pressure sensors for flow separation detection and control in aeronautical applications

NASA Astrophysics Data System (ADS)

Francioso, L.; De Pascali, C.; Pescini, E.; De Giorgi, M. G.; Siciliano, P.

2016-06-01

Preventing the flow separation could enhance the performance of propulsion systems and future civil aircraft. To this end, a fast detection of boundary layer separation is mandatory for a sustainable and successful application of active flow control devices, such as plasma actuators. The present work reports on the design, fabrication and functional tests of low-cost capacitive pressure sensors coupled with dielectric barrier discharge (DBD) plasma actuators to detect and then control flow separation. Finite element method (FEM) simulations were used to obtain information on the deflection and the stress distribution in different-shaped floating membranes. The sensor sensitivity as a function of the pressure load was also calculated by experimental tests. The results of the calibration of different capacitive pressure sensors are reported in this work, together with functional tests in a wind tunnel equipped with a curved wall plate on which a DBD plasma actuator was mounted to control the flow separation. The flow behavior was experimentally investigated by particle image velocimetry (PIV) measurements. Statistical and spectral analysis, applied to the output signals of the pressure sensor placed downstream of the profile leading edge, demonstrated that the sensor is able to discriminate different ionic wind velocity and turbulence conditions. The sensor sensitivity in the 0-100 Pa range was experimentally measured and it ranged between 0.0030 and 0.0046 pF Pa-1 for the best devices.

Fabrication of a Quartz-Crystal-Microbalance/Optical-Waveguide Hybrid Sensor and In situ Evaluation of Vacuum-Evaporated Lead Phthalocyanine Thin Film

NASA Astrophysics Data System (ADS)

Shinbo, Kazunari; Uno, Akihiro; Hirakawa, Ryo; Baba, Akira; Ohdaira, Yasuo; Kato, Keizo; Kaneko, Futao

2013-05-01

In this study, we fabricated a novel quartz-crystal-microbalance (QCM)/optical-waveguide hybrid sensor. An in situ observation of a lead phthalocyanine (PbPc) thin-film deposition was conducted during vacuum evaporation, and the effectiveness of the sensor was demonstrated. The film thickness was obtained from the QCM frequency, and the optical absorption of the film was observed by optical waveguide spectroscopy using part of the QCM substrate without the electrode. The film absorption depends on the polarization direction, substrate temperature and deposition rate, owing to aggregate formation. The thickness dependence of the absorption property was also investigated.

Innovative monitoring of 3D warp interlock fabric during forming process

NASA Astrophysics Data System (ADS)

Dufour, C.; Jerkovic, I.; Wang, P.; Boussu, F.; Koncar, V.; Soulat, D.; Grancaric, A. M.; Pineau, P.

2017-10-01

The final geometry of 3D warp interlock fabric needs to be check during the 3D forming step to ensure the right locations of warp and weft yarns inside the final structure. Thus, a new monitoring approach has been proposed based on sensor yarns located in the fabric thickness. To ensure the accuracy of measurements, the observation of the surface deformation of the 3D warp interlock fabric has been joined to the sensor yarns measurements. At the end, it has been revealed a good correlation between strain measurement done globally by camera and locally performed by sensor yarns.

An Electronic-Nose Sensor Node Based on a Polymer-Coated Surface Acoustic Wave Array for Wireless Sensor Network Applications

PubMed Central

Tang, Kea-Tiong; Li, Cheng-Han; Chiu, Shih-Wen

2011-01-01

This study developed an electronic-nose sensor node based on a polymer-coated surface acoustic wave (SAW) sensor array. The sensor node comprised an SAW sensor array, a frequency readout circuit, and an Octopus II wireless module. The sensor array was fabricated on a large K2 128° YX LiNbO3 sensing substrate. On the surface of this substrate, an interdigital transducer (IDT) was produced with a Cr/Au film as its metallic structure. A mixed-mode frequency readout application specific integrated circuit (ASIC) was fabricated using a TSMC 0.18 μm process. The ASIC output was connected to a wireless module to transmit sensor data to a base station for data storage and analysis. This sensor node is applicable for wireless sensor network (WSN) applications. PMID:22163865

An electronic-nose sensor node based on a polymer-coated surface acoustic wave array for wireless sensor network applications.

PubMed

Tang, Kea-Tiong; Li, Cheng-Han; Chiu, Shih-Wen

2011-01-01

This study developed an electronic-nose sensor node based on a polymer-coated surface acoustic wave (SAW) sensor array. The sensor node comprised an SAW sensor array, a frequency readout circuit, and an Octopus II wireless module. The sensor array was fabricated on a large K(2) 128° YX LiNbO3 sensing substrate. On the surface of this substrate, an interdigital transducer (IDT) was produced with a Cr/Au film as its metallic structure. A mixed-mode frequency readout application specific integrated circuit (ASIC) was fabricated using a TSMC 0.18 μm process. The ASIC output was connected to a wireless module to transmit sensor data to a base station for data storage and analysis. This sensor node is applicable for wireless sensor network (WSN) applications.

A Fiber Optic Ammonia Sensor Using a Universal pH Indicator

PubMed Central

Rodríguez, Adolfo J.; Zamarreño, Carlos R.; Matías, Ignacio R.; Arregui, Francisco. J.; Domínguez Cruz, Rene F.; May-Arrioja, Daniel. A.

2014-01-01

A universal pH indicator is used to fabricate a fiber optic ammonia sensor. The advantage of this pH indicator is that it exhibits sensitivity to ammonia over a broad wavelength range. This provides a differential response, with a valley around 500 nm and a peak around 650 nm, which allows us to perform ratiometric measurements. The ratiometric measurements provide not only an enhanced signal, but can also eliminate any external disturbance due to humidity or temperature fluctuations. In addition, the indicator is embedded in a hydrophobic and gas permeable polyurethane film named Tecoflex®. The film provides additional advantages to the sensor, such as operation in dry environments, efficient transport of the element to be measured to the sensitive area of the sensor, and prevent leakage or detachment of the indicator. The combination of the universal pH indicator and Tecoflex® film provides a reliable and robust fiber optic ammonia sensor. PMID:24583969

HOPG/ZnO/HOPG pressure sensor

NASA Astrophysics Data System (ADS)

Jahangiri, Mojtaba; Yousefiazari, Ehsan; Ghalamboran, Milad

2017-12-01

Pressure sensor is one of the most commonly used sensors in the research laboratories and industries. These are generally categorized in three different classes of absolute pressure sensors, gauge pressure sensors, and differential pressure sensors. In this paper, we fabricate and assess the pressure sensitivity of the current vs. voltage diagrams in a graphite/ZnO/graphite structure. Zinc oxide layers are deposited on highly oriented pyrolytic graphite (HOPG) substrates by sputtering a zinc target under oxygen plasma. The top electrode is also a slice of HOPG which is placed on the ZnO layer and connected to the outside electronic circuits. By recording the I-V characteristics of the device under different forces applied to the top HOPG electrode, the pressure sensitivity is demonstrated; at the optimum biasing voltage, the device current changes 10 times upon changing the pressure level on the top electrode by 20 times. Repeatability and reproducibility of the observed effect is studied on the same and different samples. All the materials used for the fabrication of this pressure sensor are biocompatible, the fabricated device is anticipated to find potential applications in biomedical engineering.

Fabrication of Gold-coated 3-D Woodpile Structures for Mid-IR Thermal Emitters

NASA Astrophysics Data System (ADS)

Li, Shengkai; Moridani, Amir; Kothari, Rohit; Lee, Jae-Hwang; Watkins, James

3-D metallic woodpile nanostructures possess enhancements in thermal radiation that are both wavelength and polarization specific and are promising for thermal-optical devices for various applications including thermal photovoltaics, self-cooling devices, and chemical and bio-sensors. However, current fabrication techniques for such structures are limited by slow speed, small area capability, the need for expensive facilities and, in general, are not suitable for high-throughput mass production. Here we demonstrate a new strategy for the fabrication of 3D metallic woodpile structures. Well-defined TiO2 woodpile structures were fabricated using a layer-by-layer nanoimprint method using TiO2 nanoparticle ink dispersions. The TiO2 woodpile was then coated with a high purity, conformal gold film via reactive deposition in supercritical carbon dioxide. The final gold-coated woodpile structures exhibit strong spectral and polarization specific thermal emission enhancements. The fabrication method demonstrated here is promising for high-throughput, low-cost preparation of 3D metallic woodpile structures and other 3D nanostructures. Center for Hierarchical Manufacturing, NSF.

Micropatternable Double-Faced ZnO Nanoflowers for Flexible Gas Sensor.

PubMed

Kim, Jong-Woo; Porte, Yoann; Ko, Kyung Yong; Kim, Hyungjun; Myoung, Jae-Min

2017-09-27

Micropatternable double-faced (DF) zinc oxide (ZnO) nanoflowers (NFs) for flexible gas sensors have been successfully fabricated on a polyimide (PI) substrate with single-walled carbon nanotubes (SWCNTs) as electrode. The fabricated sensor comprises ZnO nanoshells laid out on a PI substrate at regular intervals, on which ZnO nanorods (NRs) were grown in- and outside the shells to maximize the surface area and form a connected network. This three-dimensional network structure possesses multiple gas diffusion channels and the micropatterned island structure allows the stability of the flexible devices to be enhanced by dispersing the strain into the empty spaces of the substrate. Moreover, the micropatterning technique on a flexible substrate enables highly integrated nanodevices to be fabricated. The SWCNTs were chosen as the electrode for their flexibility and the Schottky barrier they form with ZnO, improving the sensing performance. The devices exhibited high selectivity toward NO 2 as well as outstanding sensing characteristics with a stable response of 218.1, fast rising and decay times of 25.0 and 14.1 s, respectively, and percent recovery greater than 98% upon NO 2 exposure. The superior sensing properties arose from a combination of high surface area, numerous active junction points, donor point defects in the ZnO NRs, and the use of the SWCNT electrode. Furthermore, the DF-ZnO NF gas sensor showed sustainable mechanical stability. Despite the physical degradation observed, the devices still demonstrated outstanding sensing characteristics after 10 000 bending cycles at a curvature radius of 5 mm.

Multivariable bio-inspired photonic sensors for non-condensable gases

NASA Astrophysics Data System (ADS)

Potyrailo, Radislav A.; Karker, Nicholas; Carpenter, Michael A.; Minnick, Andrew

2018-02-01

Existing gas sensors often lose their measurement accuracy in practical field applications. To mitigate this significant problem, here, we report a demonstration of fabricated multivariable photonic sensors inspired by a known nanostructure of Morpho butterfly scales for detection of exemplary non-condensable gases such as H2, CO, and CO2. We fabricated bio-inspired nanostructures using conventional photolithography and chemical etching and detected individual gases that were difficult or unrealistic to detect using natural Morpho nanostructures. Such bio-inspired gas sensors are the critical step in the development of new sensors with improved accuracy for diverse operational scenarios. While this report is our initial demonstration of responses of fabricated multivariable sensors to individual gases in pristine laboratory conditions, it is a significant milestone in understanding the next steps toward field tests and practical applications of these sensors.

Fabricating nanowire devices on diverse substrates by simple transfer-printing methods.

PubMed

Lee, Chi Hwan; Kim, Dong Rip; Zheng, Xiaolin

2010-06-01

The fabrication of nanowire (NW) devices on diverse substrates is necessary for applications such as flexible electronics, conformable sensors, and transparent solar cells. Although NWs have been fabricated on plastic and glass by lithographic methods, the choice of device substrates is severely limited by the lithographic process temperature and substrate properties. Here we report three new transfer-printing methods for fabricating NW devices on diverse substrates including polydimethylsiloxane, Petri dishes, Kapton tapes, thermal release tapes, and many types of adhesive tapes. These transfer-printing methods rely on the differences in adhesion to transfer NWs, metal films, and devices from weakly adhesive donor substrates to more strongly adhesive receiver substrates. Electrical characterization of fabricated NW devices shows that reliable ohmic contacts are formed between NWs and electrodes. Moreover, we demonstrated that Si NW devices fabricated by the transfer-printing methods are robust piezoresistive stress sensors and temperature sensors with reliable performance.

MEMS based Low Cost Piezoresistive Microcantilever Force Sensor and Sensor Module

PubMed Central

Pandya, H. J.; Kim, Hyun Tae; Roy, Rajarshi; Desai, Jaydev P.

2014-01-01

In the present work, we report fabrication and characterization of a low-cost MEMS based piezoresistive micro-force sensor with SU-8 tip using laboratory made silicon-on-insulator (SOI) substrate. To prepare SOI wafer, silicon film (0.8 µm thick) was deposited on an oxidized silicon wafer using RF magnetron sputtering technique. The films were deposited in Argon (Ar) ambient without external substrate heating. The material characteristics of the sputtered deposited silicon film and silicon film annealed at different temperatures (400–1050°C) were studied using atomic force microscopy (AFM) and X-ray diffraction (XRD) techniques. The residual stress of the films was measured as a function of annealing temperature. The stress of the as-deposited films was observed to be compressive and annealing the film above 1050°C resulted in a tensile stress. The stress of the film decreased gradually with increase in annealing temperature. The fabricated cantilevers were 130 µm in length, 40 µm wide and 1.0 µm thick. A series of force-displacement curves were obtained using fabricated microcantilever with commercial AFM setup and the data were analyzed to get the spring constant and the sensitivity of the fabricated microcantilever. The measured spring constant and sensitivity of the sensor was 0.1488N/m and 2.7mV/N. The microcantilever force sensor was integrated with an electronic module that detects the change in resistance of the sensor with respect to the applied force and displays it on the computer screen. PMID:24855449

MEMS based Low Cost Piezoresistive Microcantilever Force Sensor and Sensor Module.

PubMed

Pandya, H J; Kim, Hyun Tae; Roy, Rajarshi; Desai, Jaydev P

2014-03-01

In the present work, we report fabrication and characterization of a low-cost MEMS based piezoresistive micro-force sensor with SU-8 tip using laboratory made silicon-on-insulator (SOI) substrate. To prepare SOI wafer, silicon film (0.8 µm thick) was deposited on an oxidized silicon wafer using RF magnetron sputtering technique. The films were deposited in Argon (Ar) ambient without external substrate heating. The material characteristics of the sputtered deposited silicon film and silicon film annealed at different temperatures (400-1050°C) were studied using atomic force microscopy (AFM) and X-ray diffraction (XRD) techniques. The residual stress of the films was measured as a function of annealing temperature. The stress of the as-deposited films was observed to be compressive and annealing the film above 1050°C resulted in a tensile stress. The stress of the film decreased gradually with increase in annealing temperature. The fabricated cantilevers were 130 µm in length, 40 µm wide and 1.0 µm thick. A series of force-displacement curves were obtained using fabricated microcantilever with commercial AFM setup and the data were analyzed to get the spring constant and the sensitivity of the fabricated microcantilever. The measured spring constant and sensitivity of the sensor was 0.1488N/m and 2.7mV/N. The microcantilever force sensor was integrated with an electronic module that detects the change in resistance of the sensor with respect to the applied force and displays it on the computer screen.

Advances in SAW gas sensors based on the condensate-adsorption effect.

PubMed

Liu, Jiuling; Wang, Wen; Li, Shunzhou; Liu, Minghua; He, Shitang

2011-01-01

A surface-acoustic-wave (SAW) gas sensor with a low detection limit and fast response for volatile organic compounds (VOCs) based on the condensate-adsorption effect detection is developed. In this sensor a gas chromatography (GC) column acts as the separator element and a dual-resonator oscillator acts as the detector element. Regarding the surface effective permittivity method, the response mechanism analysis, which relates the condensate-adsorption effect, is performed, leading to the sensor performance prediction prior to fabrication. New designs of SAW resonators, which act as feedback of the oscillator, are devised in order to decrease the insertion loss and to achieve single-mode control, resulting in superior frequency stability of the oscillator. Based on the new phase modulation approach, excellent short-term frequency stability (±3 Hz/s) is achieved with the SAW oscillator by using the 500 MHz dual-port resonator as feedback element. In a sensor experiment investigating formaldehyde detection, the implemented SAW gas sensor exhibits an excellent threshold detection limit as low as 0.38 pg.

Using Micro-Molding and Stamping to Fabricate Conductive Polydimethylsiloxane-Based Flexible High-Sensitivity Strain Gauges.

PubMed

Han, Chi-Jui; Chiang, Hsuan-Ping; Cheng, Yun-Chien

2018-02-18

In this study, polydimethylsiloxane (PDMS) and conductive carbon nanoparticles were combined to fabricate a conductive elastomer PDMS (CPDMS). A high sensitive and flexible CPDMS strain sensor is fabricated by using stamping-process based micro patterning. Compared with conventional sensors, flexible strain sensors are more suitable for medical applications but are usually fabricated by photolithography, which suffers from a large number of steps and difficult mass production. Hence, we fabricated flexible strain sensors using a stamping-process with fewer processes than photolithography. The piezoresistive coefficient and sensitivity of the flexible strain sensor were improved by sensor pattern design and thickness change. Micro-patterning is used to fabricate various CPDMS microstructure patterns. The effect of gauge pattern was evaluated with ANSYS simulations. The piezoresistance of the strain gauges was measured and the gauge factor determined. Experimental results show that the piezoresistive coefficient of CPDMS is approximately linear. Gauge factor measurement results show that the gauge factor of a 140.0 μm thick strain gauge with five grids is the highest.

Repeatability and Reversibility of the Humidity Sensor Based on Photonic Crystal Fiber Interferometer

NASA Astrophysics Data System (ADS)

Hindal, S. S.; Taher, H. J.

2018-05-01

The RH sensor operation based on water vapor adsorption and desorption at the silica-air interface within the PCF. Sensor fabrication is simple; it includes splicing and cleaving the PCF with SMF only. PCF (LMA-10) with a certain length spliced to SMF (Corning-28). The PCFI spectrum exhibits good sensitivity to the variations of humidity. The PCFI response is observed for range of relative humidity values from (27% RH to 85% RH), the interference peaks position is found to be shifted to longer wavelength as the humidity increases. In this work, a 6cm length of PCFs is used, and it shows a sensitivity of (2.41pm / %RH), good repeatability, and reversible in nature. This humidity sensor has distinguished features as that the sensor does not require the use of a hygroscopic material, robust, compact size, immunity to electromagnetic interference, and it has potential applications for high humidity environments.

Contact stress sensor

DOEpatents

Kotovsky, Jack

2014-02-11

A method for producing a contact stress sensor that includes one or more MEMS fabricated sensor elements, where each sensor element of includes a thin non-recessed portion, a recessed portion and a pressure sensitive element adjacent to the recessed portion. An electric circuit is connected to the pressure sensitive element. The circuit includes a pressure signal circuit element configured to provide a signal upon movement of the pressure sensitive element.

Contact stress sensor

DOEpatents

Kotovsky, Jack [Oakland, CA

2012-02-07

A contact stress sensor includes one or more MEMS fabricated sensor elements, where each sensor element of includes a thin non-recessed portion, a recessed portion and a pressure sensitive element adjacent to the recessed portion. An electric circuit is connected to the pressure sensitive element. The circuit includes a thermal compensator and a pressure signal circuit element configured to provide a signal upon movement of the pressure sensitive element.

Developing Multilayer Thin Film Strain Sensors With High Thermal Stability

NASA Technical Reports Server (NTRS)

Wrbanek, John D.; Fralick, Gustave C.; Gonzalez, Jose M., III

2006-01-01

A multilayer thin film strain sensor for large temperature range use is under development using a reactively-sputtered process. The sensor is capable of being fabricated in fine line widths utilizing the sacrificial-layer lift-off process that is used for micro-fabricated noble-metal sensors. Tantalum nitride films were optimized using reactive sputtering with an unbalanced magnetron source. A first approximation model of multilayer resistance and temperature coefficient of resistance was used to set the film thicknesses in the multilayer film sensor. Two multifunctional sensors were fabricated using multilayered films of tantalum nitride and palladium chromium, and tested for low temperature resistivity, TCR and strain response. The low temperature coefficient of resistance of the films will result in improved stability in thin film sensors for low to high temperature use.

Synthesis and Characterization of Mimosa Pudica Leaves Shaped α-Iron Oxide Nanostructures for Ethanol Chemical Sensor Applications.

PubMed

Kim, S H; Ibrahim, Ahmed A; Kumar, R; Umar, Ahmad; Abaker, M; Hwang, S W; Baskoutas, S

2016-03-01

Herein, the synthesis of mimosa pudica leaves shaped a-iron oxide (α-Fe2O3) nanostructures is reported through simple and facile hydrothermal process. The prepared α-Fe2O3 nanostructures were characterized in terms of their morphological, structural, compositional and optical properties through a variety of characterization techniques such as FESEM, EDS, XRD, FTIR and Raman spectroscopy. The detailed characterizations revealed the well-crystallinity and dense growth of mimosa pudica leaf shaped α-Fe2O3 nanostructures. Further, the prepared nanomaterials were used as efficient electron mediator to fabricate sensitive ethanol chemical sensor. The fabricated sensor exhibited a high sensitivity of -30.37 μAmM(-1) cm(-2) and low detection limit of -0.62 μM. The observed linear dynamic range (LDR) was in the range from 10 μM-0.625 μM.

High temperature ultrasonic sensor for fission gas characterization in MTR harsh environment

NASA Astrophysics Data System (ADS)

Gatsa, O.; Combette, P.; Rozenkrantz, E.; Fourmentel, D.; Destouches, C.; Ferrandis, J. Y. AD(; )

2018-01-01

In the contemporary world, the measurements in hostile environment is one of the predominant necessity for automotive, aerospace, metallurgy and nuclear plant. The measurement of different parameters in experimental reactors is an important point in nuclear power strategy. In the near past, IES (Institut d'Électronique et des Systèmes) on collaboration with CEA (Commissariat à l'Energie Atomique et aux Energies Alternatives) have developed the first ultrasonic sensor for the application of gas quantity determination that has been tested in a Materials Testing Reactor (MTR). Modern requirements state to labor with the materials that possess stability on its parameters around 350°C in operation temperature. Previous work on PZT components elaboration by screen printing method established the new basis in thick film fabrication and characterization in our laboratory. Our trials on Bismuth Titanate ceramics showed the difficulties related to high electrical conductivity of fabricated samples that postponed further research on this material. Among piezoceramics, the requirements on finding an alternative solution on ceramics that might be easily polarized and fabricated by screen printing approach were resolved by the fabrication of thick film from Sodium Bismuth Titanate (NBT) piezoelectric powder. This material exhibits high Curie temperature, relatively good piezoelectric and coupling coefficients, and it stands to be a good solution for the anticipated application. In this paper, we present NBT thick film fabrication by screen printing, characterization of piezoelectric, dielectric properties and material parameters studies in dependence of temperature. Relatively high resistivity in the range of 1.1013 Ohm.cm for fabricated thick film is explained by Aurivillius structure in which a-and b-layers form perovskite structure between oxides of c-layer. Main results of this study are presented and discussed in terms of feasibility for an application to a new sensor

A silicon micromachined resonant pressure sensor

NASA Astrophysics Data System (ADS)

Tang, Zhangyang; Fan, Shangchun; Cai, Chenguang

2009-09-01

This paper describes the design, fabrication and test of a silicon micromachined resonant pressure sensor. A square membrane and a doubly clamped resonant beam constitute a compound structure. The former senses the pressure directly, while the latter changes its resonant frequency according to deformation of the membrane. The final output relation between the resonant frequency and the applied pressure is deducted according to the structure mechanical properties. Sensors are fabricated by micromachining technology, and then sealed in vaccum. These sensors are tested by open-loop and close-loop system designed on purpose. The experiment results demonstrate that the sensor has a sensitivity of 49.8Hz/kPa and repeatability of 0.08%.

A novel nonenzymatic hydrogen peroxide amperometric sensor based on Pd@CeO2-NH2 nanocomposites modified glassy carbon electrode.

PubMed

Guler, Muhammet; Turkoglu, Vedat; Kivrak, Arif; Karahan, Fatih

2018-09-01

Herein, (3-aminopropyl)triethoxysilane functionalized cerium (IV) oxide (CeO 2 -NH 2 ) supported Pd nanoparticles were synthesized. The nanocomposites were characterized using Fourier transform infrared spectroscopy (FTIR), X-ray diffraction (XRD), and High-resolution transmission electron microscopy (HRTEM). The Pd@CeO 2 -NH 2 showed better electrocatalytic response to the reduction of H 2 O 2 than CeO 2 -NH 2 . The fabricated sensor exhibited two linear responses to the reduction of H 2 O 2 . The first one was from 0.001 to 3.276 mM with 0.47 μM of a limit of detection (LOD) (S/N = 3) and excellent sensitivity of 440.72 μA mM -1  cm -2 and the second one was from 3.276 to 17.500 mM with the sensitivity of 852.65 μA mM -1  cm -2 in the optimum conductions. Also, the sensor exhibited 91% of electrocatalytic activity toward H 2 O 2 after having been used for 30 days and the reproducibility was also satisfactory. The sensor response to H 2 O 2 was not affected by ascorbic acid, fructose, glycine, dopamine, arginine, mannose, glucose, uric acid, Mg +2 , Ca +2 , and phenylalanine at the studied potential. Also, the fabricated sensor was used to determine H 2 O 2 in milk samples. The results show that the constructed sensor can be a promising devise for the determination of H 2 O 2 in real samples. Copyright © 2018 Elsevier B.V. All rights reserved.

Novel glucose fiber sensor combining ThFBG with GOD

NASA Astrophysics Data System (ADS)

Li, Mengmeng; Zhou, Ciming; Fan, Dian; Ou, Yiwen

2016-10-01

We propose a novel glucose fiber optic sensor combining a thinned cladding fiber Bragg grating (ThFBG) with glucose oxidase (GOD). By immobilizing GOD on the surface of a ThFBG, the fabricated sensor can obtain a high specificity to glucose. Because of the evanescent field, the sensor is very sensitive to the ambient refractive index change arising from the catalytic reaction between glucose and GOD. A four-level fiber model was simulated and verified the precision of the sensing principle. Two methods, glutaraldehyde crosslinking method (GCM) and 3-aminopropyl triethoxysilane covalent coupling method (ATCCM), were experimentally utilized to immobilize GOD. And sensor fabricated with the method ATCCM shows a measurement range of 0-0.82 mg/mL which is better than the sensor fabricated with the method GCM with measurement range of 0-0.67 mg/mL under the same condition. By using ATCCM to immobilize GOD with different concentrations, three sensors were fabricated and used for glucose measurement by monitoring the Bragg wavelength (λb) shifts, the results indicate a good linear relationship between wavelength shift and glucose concentration within a specific range, and the measurement range increases as GOD concentration increases. The highest sensitivity of sensor reaches up to 0.0549 nm/(mg.mL-1). The proposed sensor has distinct advantages in sensing structure, cost and specificity.

Development of a Batch Fabrication Process for Chemical Nanosensors: Recent Advancements at NASA Glenn Research Center

NASA Technical Reports Server (NTRS)

Biaggi-Labiosa, Azlin M.

2014-01-01

A major objective in aerospace sensor development is to produce sensors that are small in size, easy to batch fabricate and low in cost, and have low power consumption. Chemical sensors involving nanostructured materials can provide these characteristics as well as the potential for the development of sensor systems with unique properties and improved performance. However, the fabrication and processing of nanostructures for sensor applications currently is limited by the ability to control their location on the sensor platform, which in turn hinders the progress for batch fabrication. This presentation will discuss the following: the development of a novel room temperature methane (CH4) sensor fabricated using porous tin oxide (SnO2) nanorods as the sensing material, the advantages of using nanomaterials in sensor designs, the challenges encountered with the integration of nanostructures into microsensordevices, and the different methods that have been attempted to address these challenges. An approach for the mass production of sensors with nanostructures using a method developed by our group at the NASA Glenn Research Center to control the alignment of nanostructures onto a sensor platform will also be described.

Nanowire sensor, sensor array, and method for making the same

NASA Technical Reports Server (NTRS)

Homer, Margie (Inventor); Fleurial, Jean-Pierre (Inventor); Bugga, Ratnakumar (Inventor); Vasquez, Richard (Inventor); Yun, Minhee (Inventor); Myung, Nosang (Inventor); Choi, Daniel (Inventor); Goddard, William (Inventor); Ryan, Margaret (Inventor); Yen, Shiao-Pin (Inventor)

2012-01-01

The present invention relates to a nanowire sensor and method for forming the same. More specifically, the nanowire sensor comprises at least one nanowire formed on a substrate, with a sensor receptor disposed on a surface of the nanowire, thereby forming a receptor-coated nanowire. The nanowire sensor can be arranged as a sensor sub-unit comprising a plurality of homogeneously receptor-coated nanowires. A plurality of sensor subunits can be formed to collectively comprise a nanowire sensor array. Each sensor subunit in the nanowire sensor array can be formed to sense a different stimulus, allowing a user to sense a plurality of stimuli. Additionally, each sensor subunit can be formed to sense the same stimuli through different aspects of the stimulus. The sensor array is fabricated through a variety of techniques, such as by creating nanopores on a substrate and electrodepositing nanowires within the nanopores.

Flexible micro flow sensor for micro aerial vehicles

NASA Astrophysics Data System (ADS)

Zhu, Rong; Que, Ruiyi; Liu, Peng

2017-12-01

This article summarizes our studies on micro flow sensors fabricated on a flexible polyimide circuit board by a low-cost hybrid process of thin-film deposition and circuit printing. The micro flow sensor has merits of flexibility, structural simplicity, easy integrability with circuits, and good sensing performance. The sensor, which adheres to an object surface, can detect the surface flow around the object. In our study, we install the fabricated micro flow sensors on micro aerial vehicles (MAVs) to detect the surface flow variation around the aircraft wing and deduce the aerodynamic parameters of the MAVs in flight. Wind tunnel experiments using the sensors integrated with the MAVs are also conducted.

Elaboration of ammonia gas sensors based on electrodeposited polypyrrole--cobalt phthalocyanine hybrid films.

PubMed

Patois, Tilia; Sanchez, Jean-Baptiste; Berger, Franck; Fievet, Patrick; Segut, Olivier; Moutarlier, Virginie; Bouvet, Marcel; Lakard, Boris

2013-12-15

The electrochemical incorporation of a sulfonated cobalt phthalocyanine (sCoPc) in conducting polypyrrole (PPy) was done, in the presence or absence of LiClO4, in order to use the resulting hybrid material for the sensing of ammonia. After electrochemical deposition, the morphological features and structural properties of polypyrrole/phthalocyanine hybrid films were investigated and compared to those of polypyrrole films. A gas sensor consisting in platinum microelectrodes arrays was fabricated using silicon microtechnologies, and the polypyrrole and polypyrrole/phthalocyanine films were electrochemically deposited on the platinum microelectrodes arrays of this gas sensor. When exposed to ammonia, polymer-based gas sensors exhibited a decrease in conductance due to the electron exchange between ammonia and sensitive polymer-based layer. The characteristics of the gas sensors (response time, response amplitude, reversibility) were studied for ammonia concentrations varying from 1 ppm to 100 ppm. Polypyrrole/phthalocyanine films exhibited a high sensitivity and low detection limit to ammonia as well as a fast and reproducible response at room temperature. The response to ammonia exposition of polypyrrole films was found to be strongly enhanced thanks to the incorporation of the phthalocyanine in the polypyrrole matrix. © 2013 Elsevier B.V. All rights reserved.

Fabrication and Characterization of Miniaturized Thermocouples

NASA Astrophysics Data System (ADS)

Munzel, Marco; Peinke, Joachim; Kittel, Achim

2002-11-01

The measurement of thermal fluctuations is important for discovering transport features of a passive scalar in fluids. We present a thermal sensor based on a miniaturized thermocouple. Its coaxial setup results from the fabrication as a micropipette normally used in neurobiology. The glass micropipettes contain a core of gold, antimony, or resistance wire and are coated with platinum. The core material is inserted as molten metal or wire and thinned during the fabrication process. The achieved tip diameters are 1μm and less which enhance the spatial and temporal resolution significantly. Because of its chemically inert coating, these sensors are applicative for detecting temperature fluctuations in large variety of liquids and gases. In addition, such thermocouples are intrinsically suitable for applications in scanning probe microscopy. The characterization of these sensors and first results from turbulent free-jet measurements are presented.

Porous palladium coated conducting polymer nanoparticles for ultrasensitive hydrogen sensors

NASA Astrophysics Data System (ADS)

Lee, Jun Seop; Kim, Sung Gun; Cho, Sunghun; Jang, Jyongsik

2015-12-01

Hydrogen, a clean-burning fuel, is of key importance to various industrial applications, including fuel cells and in the aerospace and automotive industries. However, hydrogen gas is odorless, colorless, and highly flammable; thus appropriate safety protocol implementation and monitoring are essential. Highly sensitive hydrogen leak detection and surveillance sensor systems are needed; additionally, the ability to maintain uniformity through repetitive hydrogen sensing is becoming increasingly important. In this report, we detail the fabrication of porous palladium coated conducting polymer (3-carboxylate polypyrrole) nanoparticles (Pd@CPPys) to detect hydrogen gas. The Pd@CPPys are produced by means of facile alkyl functionalization and chemical reduction of a pristine 3-carboxylate polypyrrole nanoparticle-contained palladium precursor (PdCl2) solution. The resulting Pd@CPPy-based sensor electrode exhibits ultrahigh sensitivity (0.1 ppm) and stability toward hydrogen gas at room temperature due to the palladium sensing layer.Hydrogen, a clean-burning fuel, is of key importance to various industrial applications, including fuel cells and in the aerospace and automotive industries. However, hydrogen gas is odorless, colorless, and highly flammable; thus appropriate safety protocol implementation and monitoring are essential. Highly sensitive hydrogen leak detection and surveillance sensor systems are needed; additionally, the ability to maintain uniformity through repetitive hydrogen sensing is becoming increasingly important. In this report, we detail the fabrication of porous palladium coated conducting polymer (3-carboxylate polypyrrole) nanoparticles (Pd@CPPys) to detect hydrogen gas. The Pd@CPPys are produced by means of facile alkyl functionalization and chemical reduction of a pristine 3-carboxylate polypyrrole nanoparticle-contained palladium precursor (PdCl2) solution. The resulting Pd@CPPy-based sensor electrode exhibits ultrahigh sensitivity (0.1 ppm

Fabrication of thin film heat flux sensors

NASA Technical Reports Server (NTRS)

Will, Herbert

1991-01-01

Thin-film heat-flux sensors have been constructed in the form of arrays of thermocouples on upper and lower surfaces of an insulating layer, so that flux values are proportional to the temperature difference across the upper and lower surface of the insulation material. The sensor thermocouples are connected in thermopile arrangement, and the structure is patterned with photolithographic techniques. Both chromel-alumel and Pt-Pt/Rh thermocouples have been devised; the later produced 28 microvolts when exposed to the radiation of a 1000 C furnace.

Fiber waveguide sensors for intelligent materials

NASA Technical Reports Server (NTRS)

Flax, A. R.; Claus, R. O.

1988-01-01

This report, an addendum to the six month report submitted to NASA Langley Research Center in December 1987, covers research performed by the Fiber and Electro-Optics Research Center (FEORC) at Virginia Tech for the NASA Langley Research Center, Grant NAG1-780, for the period from December 1987 to June 1988. This final report discusses the research performed in the following four areas as described in the proposal: Fabrication of Sensor Fibers Optimized for Embedding in Advanced Composites; Fabrication of Sensor Fiber with In-Line Splices and Evaluation via OTR methods; Modal Domain Optical Fiber Sensor Analysis; and Acoustic Fiber Waveguide Implementation.

Fused Filament Fabrication of Prosthetic Components for Trans-Humeral Upper Limb Prosthetics

NASA Astrophysics Data System (ADS)

Lathers, Steven M.

Presented below is the design and fabrication of prosthetic components consisting of an attachment, tactile sensing, and actuator systems with Fused Filament Fabrication (FFF) technique. The attachment system is a thermoplastic osseointegrated upper limb prosthesis for average adult trans-humeral amputation with mechanical properties greater than upper limb skeletal bone. The prosthetic designed has: a one-step surgical process, large cavities for bone tissue ingrowth, uses a material that has an elastic modulus less than skeletal bone, and can be fabricated on one system. FFF osseointegration screw is an improvement upon the current two-part osseointegrated prosthetics that are composed of a fixture and abutment. The current prosthetic design requires two invasive surgeries for implantation and are made of titanium, which has an elastic modulus greater than bone. An elastic modulus greater than bone causes stress shielding and overtime can cause loosening of the prosthetic. The tactile sensor is a thermoplastic piezo-resistive sensor for daily activities for a prosthetic's feedback system. The tactile sensor is manufactured from a low elastic modulus composite comprising of a compressible thermoplastic elastomer and conductive carbon. Carbon is in graphite form and added in high filler ratios. The printed sensors were compared to sensors that were fabricated in a gravity mold to highlight the difference in FFF sensors to molded sensors. The 3D printed tactile sensor has a thickness and feel similar to human skin, has a simple fabrication technique, can detect forces needed for daily activities, and can be manufactured in to user specific geometries. Lastly, a biomimicking skeletal muscle actuator for prosthetics was developed. The actuator developed is manufactured with Fuse Filament Fabrication using a shape memory polymer composite that has non-linear contractile and passive forces, contractile forces and strains comparable to mammalian skeletal muscle, reaction

Particle Fabrication Using Inkjet Printing onto Hydrophobic Surfaces for Optimization and Calibration of Trace Contraband Detection Sensors

PubMed Central

Gillen, Greg; Najarro, Marcela; Wight, Scott; Walker, Marlon; Verkouteren, Jennifer; Windsor, Eric; Barr, Tim; Staymates, Matthew; Urbas, Aaron

2015-01-01

A method has been developed to fabricate patterned arrays of micrometer-sized monodisperse solid particles of ammonium nitrate on hydrophobic silicon surfaces using inkjet printing. The method relies on dispensing one or more microdrops of a concentrated aqueous ammonium nitrate solution from a drop-on-demand (DOD) inkjet printer at specific locations on a silicon substrate rendered hydrophobic by a perfluorodecytrichlorosilane monolayer coating. The deposited liquid droplets form into the shape of a spherical shaped cap; during the evaporation process, a deposited liquid droplet maintains this geometry until it forms a solid micrometer sized particle. Arrays of solid particles are obtained by sequential translation of the printer stage. The use of DOD inkjet printing for fabrication of discrete particle arrays allows for precise control of particle characteristics (mass, diameter and height), as well as the particle number and spatial distribution on the substrate. The final mass of an individual particle is precisely determined by using gravimetric measurement of the average mass of solution ejected per microdrop. The primary application of this method is fabrication of test materials for the evaluation of spatially-resolved optical and mass spectrometry based sensors used for detecting particle residues of contraband materials, such as explosives or narcotics. PMID:26610515

Particle Fabrication Using Inkjet Printing onto Hydrophobic Surfaces for Optimization and Calibration of Trace Contraband Detection Sensors.

PubMed

Gillen, Greg; Najarro, Marcela; Wight, Scott; Walker, Marlon; Verkouteren, Jennifer; Windsor, Eric; Barr, Tim; Staymates, Matthew; Urbas, Aaron

2015-11-24

A method has been developed to fabricate patterned arrays of micrometer-sized monodisperse solid particles of ammonium nitrate on hydrophobic silicon surfaces using inkjet printing. The method relies on dispensing one or more microdrops of a concentrated aqueous ammonium nitrate solution from a drop-on-demand (DOD) inkjet printer at specific locations on a silicon substrate rendered hydrophobic by a perfluorodecytrichlorosilane monolayer coating. The deposited liquid droplets form into the shape of a spherical shaped cap; during the evaporation process, a deposited liquid droplet maintains this geometry until it forms a solid micrometer sized particle. Arrays of solid particles are obtained by sequential translation of the printer stage. The use of DOD inkjet printing for fabrication of discrete particle arrays allows for precise control of particle characteristics (mass, diameter and height), as well as the particle number and spatial distribution on the substrate. The final mass of an individual particle is precisely determined by using gravimetric measurement of the average mass of solution ejected per microdrop. The primary application of this method is fabrication of test materials for the evaluation of spatially-resolved optical and mass spectrometry based sensors used for detecting particle residues of contraband materials, such as explosives or narcotics.

Highly stretchable strain sensor based on SWCNTs/CB synergistic conductive network for wearable human-activity monitoring and recognition

NASA Astrophysics Data System (ADS)

Guo, Xiaohui; Huang, Ying; Zhao, Yunong; Mao, Leidong; Gao, Le; Pan, Weidong; Zhang, Yugang; Liu, Ping

2017-09-01

Flexible, stretchable, and wearable strain sensors have attracted significant attention for their potential applications in human movement detection and recognition. Here, we report a highly stretchable and flexible strain sensor based on a single-walled carbon nanotube (SWCNTs)/carbon black (CB) synergistic conductive network. The fabrication, synergistic conductive mechanism, and characterization of the sandwich-structured strain sensor were investigated. The experimental results show that the device exhibits high stretchability (120%), excellent flexibility, fast response (˜60 ms), temperature independence, and superior stability and reproducibility during ˜1100 stretching/releasing cycles. Furthermore, human activities such as the bending of a finger or elbow and gestures were monitored and recognized based on the strain sensor, indicating that the stretchable strain sensor based on the SWCNTs/CB synergistic conductive network could have promising applications in flexible and wearable devices for human motion monitoring.

Turbine blade and vane heat flux sensor development, phase 1

NASA Technical Reports Server (NTRS)

Atkinson, W. H.; Cyr, M. A.; Strange, R. R.

1984-01-01

Heat flux sensors available for installation in the hot section airfoils of advanced aircraft gas turbine engines were developed. Two heat flux sensors were designed, fabricated, calibrated, and tested. Measurement techniques are compared in an atmospheric pressure combustor rig test. Sensors, embedded thermocouple and the Gordon gauge, were fabricated that met the geometric and fabricability requirements and could withstand the hot section environmental conditions. Calibration data indicate that these sensors yielded repeatable results and have the potential to meet the accuracy goal of measuring local heat flux to within 5%. Thermal cycle tests and thermal soak tests indicated that the sensors are capable of surviving extended periods of exposure to the environment conditions in the turbine. Problems in calibration of the sensors caused by severe non-one dimensional heat flow were encountered. Modifications to the calibration techniques are needed to minimize this problem and proof testing of the sensors in an engine is needed to verify the designs.

Turbine blade and vane heat flux sensor development, phase 1

NASA Astrophysics Data System (ADS)

Atkinson, W. H.; Cyr, M. A.; Strange, R. R.

1984-08-01

Heat flux sensors available for installation in the hot section airfoils of advanced aircraft gas turbine engines were developed. Two heat flux sensors were designed, fabricated, calibrated, and tested. Measurement techniques are compared in an atmospheric pressure combustor rig test. Sensors, embedded thermocouple and the Gordon gauge, were fabricated that met the geometric and fabricability requirements and could withstand the hot section environmental conditions. Calibration data indicate that these sensors yielded repeatable results and have the potential to meet the accuracy goal of measuring local heat flux to within 5%. Thermal cycle tests and thermal soak tests indicated that the sensors are capable of surviving extended periods of exposure to the environment conditions in the turbine. Problems in calibration of the sensors caused by severe non-one dimensional heat flow were encountered. Modifications to the calibration techniques are needed to minimize this problem and proof testing of the sensors in an engine is needed to verify the designs.

Highly sensitive torsion sensor based on long period fiber grating fabricated by femtosecond laser pulses

NASA Astrophysics Data System (ADS)

Dong, Xinran; Xie, Zheng; Song, Yuxin; Yin, Kai; Luo, Zhi; Duan, Ji'an; Wang, Cong

2017-12-01

A highly sensitive torsion sensor based on long period fiber grating (LPFG) fabricated by 800 nm femtosecond laser pulses is proposed and demonstrated. LPFG with an attenuation depth of ∼14 dB is achieved within the wavelength range of 1425-1575 nm. The experiment results show that the LP02 and LP03 resonant wavelengths experience red-shift when the twist direction is clockwise while they occur blue-shift in the twist counterclockwise direction as the twist rate increases. However, the LP04 resonant wavelength is always shifted toward shorter wavelength independently of the twist directions and higher twist sensitivity is observed. In addition, the loss peak amplitude of LPFG shows a tendency to decrease with the twist rate increases whether the LPFG is twisted clockwise or counterclockwise. Meanwhile, the resonant wavelength occurs splitting phenomenon in the case of higher twist rate as well as the high order resonant wavelength performs more significantly. Additionally, the sensor shows a twist sensitivity as high as 118.7 pm/(rad/m) in the range of -105 to -52.5 rad/m and that of 181.7 pm/(rad/m) in the range of 52.5-105 rad/m.

Sensor Authentication in Collaborating Sensor Networks

DOE Office of Scientific and Technical Information (OSTI.GOV)

Bielefeldt, Jake Uriah

2014-11-01

In this thesis, we address a new security problem in the realm of collaborating sensor networks. By collaborating sensor networks, we refer to the networks of sensor networks collaborating on a mission, with each sensor network is independently owned and operated by separate entities. Such networks are practical where a number of independent entities can deploy their own sensor networks in multi-national, commercial, and environmental scenarios, and some of these networks will integrate complementary functionalities for a mission. In the scenario, we address an authentication problem wherein the goal is for the Operator O i of Sensor Network S imore » to correctly determine the number of active sensors in Network Si. Such a problem is challenging in collaborating sensor networks where other sensor networks, despite showing an intent to collaborate, may not be completely trustworthy and could compromise the authentication process. We propose two authentication protocols to address this problem. Our protocols rely on Physically Unclonable Functions, which are a hardware based authentication primitive exploiting inherent randomness in circuit fabrication. Our protocols are light-weight, energy efficient, and highly secure against a number of attacks. To the best of our knowledge, ours is the first to addresses a practical security problem in collaborating sensor networks.« less

Simultaneous strain and temperature sensor based on polarization maintaining fiber and multimode fiber

NASA Astrophysics Data System (ADS)

Xing, Rui; Dong, Changbin; Wang, Zixiao; Wu, Yue; Yang, Yuguang; Jian, Shuisheng

2018-06-01

A novel, simultaneous strain and temperature sensor utilizing polarization maintaining fiber (PMF) and multimode fiber (MMF) is proposed and experimentally demonstrated in this paper. The sensing head of this sensor can be obtained by splicing PMF and MMF in the structure of PMF-MMF-PMF. The extinction ratio of the transmission spectrum can be over 30 dB. The strain sensitivities of sensor by two spectrum dips can be 1.01 pm/με and 1.27 pm/με in the range from 0 to 2000 με. Meanwhile, the temperature sensitivities of 49 pm/°C and 41 pm/°C can be achieved by two spectrum dips in the range from 30 °C to 70 °C. The sensitivity difference between the two spectrum dips can be used to realize dual parameters fiber sensing. This sensor exhibits the advantages of simple fabrication, compact structure and multi-purpose measuring. It may have the great potential in fields of robot arms and artificial limbs.

A miniature extrinsic fiber Fabry-Perot pressure sensor based on fiber etching

NASA Astrophysics Data System (ADS)

Ge, Yixian; Zhou, Junping; Wang, Tingting

2011-11-01

A miniature fiber optic pressure sensor based on Fabry-Perot interference fabricated on the tip of a single mode (SM) fiber is presented. The sensor measures only 125μm in diameter. A Fabry-Perot cavity and a thin silica diaphragm are fabricated by simple techniques involving only cleaving, wet chemical etching and fusion splicing. Interference pattern of the sensor is analyzed and issues in sensor design are discussed. The overall chemical reaction of the fiber wet etching is specifically represented. Pressure testing system is carried out. By tracing a peak point in the interference spectrum, the gap length of the sensor can be demodulated. Experimental results show the sensor has a good linearity. The sensor is made entirely of fused silica, whose structure has good stability, cabinet, simple for fabrication and low cost.

Tuning the field distribution and fabrication of an Al@ZnO core-shell nanostructure for a SPR-based fiber optic phenyl hydrazine sensor.

PubMed

Tabassum, Rana; Kaur, Parvinder; Gupta, Banshi D

2016-05-27

We report the fabrication and characterization of a surface plasmon resonance (SPR)-based fiber optic sensor that uses coatings of silver and aluminum (Al)-zinc oxide (ZnO) core-shell nanostructure (Al@ZnO) for the detection of phenyl hydrazine (Ph-Hyd). To optimize the volume fraction (f) of Al in ZnO and the thickness of the core-shell nanostructure layer (d), the electric field intensity along the normal to the multilayer system is simulated using the two-dimensional multilayer matrix method. The Al@ZnO core-shell nanostructure is prepared using the laser ablation technique. Various probes are fabricated with different values of f and an optimized thickness of core-shell nanostructure for the characterization of the Ph-Hyd sensor. The performance of the Ph-Hyd sensor is evaluated in terms of sensitivity. It is found that the Ag/Al@ZnO nanostructure core-shell-coated SPR probe with f = 0.25 and d = 0.040 μm possesses the maximum sensitivity towards Ph-Hyd. These results are in agreement with the simulated ones obtained using electric field intensity. In addition, the performance of the proposed probe is compared with that of probes coated with (i) Al@ZnO nanocomposite, (ii) Al nanoparticles and (iii) ZnO nanoparticles. It is found that the probe coated with an Al@ZnO core-shell nanostructure shows the largest resonance wavelength shift. The detailed mechanism of the sensing (involving chemical reactions) is presented. The sensor also manifests optimum performance at pH 7.

Enhanced response and sensitivity of self-corrugated graphene sensors with anisotropic charge distribution

PubMed Central

Yol Jeong, Seung; Jeong, Sooyeon; Won Lee, Sang; Tae Kim, Sung; Kim, Daeho; Jin Jeong, Hee; Tark Han, Joong; Baeg, Kang-Jun; Yang, Sunhye; Seok Jeong, Mun; Lee, Geon-Woong

2015-01-01

We introduce a high-performance molecular sensor using self-corrugated chemically modified graphene as a three dimensional (3D) structure that indicates anisotropic charge distribution. This is capable of room-temperature operation, and, in particular, exhibiting high sensitivity and reversible fast response with equilibrium region. The morphology consists of periodic, “cratered” arrays that can be formed by condensation and evaporation of graphene oxide (GO) solution on interdigitated electrodes. Subsequent hydrazine reduction, the corrugated edge area of the graphene layers have a high electric potential compared with flat graphene films. This local accumulation of electrons interacts with a large number of gas molecules. The sensitivity of 3D-graphene sensors significantly increases in the atmosphere of NO2 gas. The intriguing structures have several advantages for straightforward fabrication on patterned substrates, high-performance graphene sensors without post-annealing process. PMID:26053892

Mechanism of room temperature oxygen sensor based on nanocrystalline TiO2 film

NASA Astrophysics Data System (ADS)

Bakri, A. S.; Sahdan, M. Z.; Nafarizal, N.; Abdullah, S. A.; Said, N. D. M.; Raship, N. A.; Sari, Y.

2018-04-01

A titanium dioxide (TiO2) thin film is proposed as the active layer for the detection of oxygen gas. The sensor is fabricated on silicon wafer using sol-gel dip coating technique with a constant withdrawal speed. The field emission scanning electron microscope image reveals that the film has a uniform structure while the x-ray diffraction analysis indicates that the film is anatase phase with tetragonal lattice structure. The film exhibit the highest intensity peak at (101) plane. The surface roughness measurement shows that the film has low surface roughness with small grain size. The electrical studies revealed that the resistivity is about 4.02 x 10-3 Ω.cm and the thickness of TiO2 film is 127.44 nm. The gas sensor measurement showed that the sensor response of the film is about 4.21% at room temperature.

Fabrication and characterization of nano-gas sensor arrays

DOE Office of Scientific and Technical Information (OSTI.GOV)

Hassan, H. S., E-mail: hassan.shokry@gmail.com; Kashyout, A. B., E-mail: hady8@yahoo.com; Morsi, I., E-mail: drimanmorsi@yahoo.com

2015-03-30

A novel structures of Nanomaterials gas sensors array constructed using ZnO, and ZnO doped with Al via sol-gel technique. Two structure arrays are developed; the first one is a double sensor array based on doping with percentages of 1% and 5%. The second is a quadrature sensor array based on several doping ratios concentrations (0%, 1%, 5% and 10%). The morphological structures of prepared ZnO were revealed using scanning electron microscope (SEM). X-ray diffraction (XRD) patterns reveal a highly crystallized wurtzite structure and used for identifying phase structure and chemical state of both ZnO and ZnO doped with Al undermore » different preparation conditions and different doping ratios. Chemical composition of Al-doped ZnO nanopowders was performed using energy dispersive x-ray (EDS) analysis. The electrical characteristics of the sensor are determined by measuring the two terminal sensor’s output resistance for O{sub 2}, H{sub 2} and CO{sub 2} gases as a function of temperature.« less

Nanometric Integrated Temperature and Thermal Sensors in CMOS-SOI Technology

PubMed Central

Malits, Maria; Nemirovsky, Yael

2017-01-01

This paper reviews and compares the thermal and noise characterization of CMOS (complementary metal-oxide-semiconductor) SOI (Silicon on insulator) transistors and lateral diodes used as temperature and thermal sensors. DC analysis of the measured sensors and the experimental results in a broad (300 K up to 550 K) temperature range are presented. It is shown that both sensors require small chip area, have low power consumption, and exhibit linearity and high sensitivity over the entire temperature range. However, the diode’s sensitivity to temperature variations in CMOS-SOI technology is highly dependent on the diode’s perimeter; hence, a careful calibration for each fabrication process is needed. In contrast, the short thermal time constant of the electrons in the transistor’s channel enables measuring the instantaneous heating of the channel and to determine the local true temperature of the transistor. This allows accurate “on-line” temperature sensing while no additional calibration is needed. In addition, the noise measurements indicate that the diode’s small area and perimeter causes a high 1/f noise in all measured bias currents. This is a severe drawback for the sensor accuracy when using the sensor as a thermal sensor; hence, CMOS-SOI transistors are a better choice for temperature sensing. PMID:28758932

Nanometric Integrated Temperature and Thermal Sensors in CMOS-SOI Technology.

PubMed

Malits, Maria; Nemirovsky, Yael

2017-07-29

This paper reviews and compares the thermal and noise characterization of CMOS (complementary metal-oxide-semiconductor) SOI (Silicon on insulator) transistors and lateral diodes used as temperature and thermal sensors. DC analysis of the measured sensors and the experimental results in a broad (300 K up to 550 K) temperature range are presented. It is shown that both sensors require small chip area, have low power consumption, and exhibit linearity and high sensitivity over the entire temperature range. However, the diode's sensitivity to temperature variations in CMOS-SOI technology is highly dependent on the diode's perimeter; hence, a careful calibration for each fabrication process is needed. In contrast, the short thermal time constant of the electrons in the transistor's channel enables measuring the instantaneous heating of the channel and to determine the local true temperature of the transistor. This allows accurate "on-line" temperature sensing while no additional calibration is needed. In addition, the noise measurements indicate that the diode's small area and perimeter causes a high 1/ f noise in all measured bias currents. This is a severe drawback for the sensor accuracy when using the sensor as a thermal sensor; hence, CMOS-SOI transistors are a better choice for temperature sensing.

Development of heat flux sensors for turbine airfoils

NASA Astrophysics Data System (ADS)

Atkinson, William H.; Cyr, Marcia A.; Strange, Richard R.

1985-10-01

The objectives of this program are to develop heat flux sensors suitable for installation in hot section airfoils of advanced aircraft turbine engines and to experimentally verify the operation of these heat flux sensors in a cylinder in a cross flow experiment. Embedded thermocouple and Gardon gauge sensors were developed and fabricated into both blades and vanes. These were then calibrated using a quartz lamp bank heat source and finally subjected to thermal cycle and thermal soak testing. These sensors were also fabricated into cylindrical test pieces and tested in a burner exhaust to verify heat flux measurements produced by these sensors. The results of the cylinder in cross flow tests are given.

Development of heat flux sensors for turbine airfoils

NASA Technical Reports Server (NTRS)

Atkinson, William H.; Cyr, Marcia A.; Strange, Richard R.

1985-01-01

The objectives of this program are to develop heat flux sensors suitable for installation in hot section airfoils of advanced aircraft turbine engines and to experimentally verify the operation of these heat flux sensors in a cylinder in a cross flow experiment. Embedded thermocouple and Gardon gauge sensors were developed and fabricated into both blades and vanes. These were then calibrated using a quartz lamp bank heat source and finally subjected to thermal cycle and thermal soak testing. These sensors were also fabricated into cylindrical test pieces and tested in a burner exhaust to verify heat flux measurements produced by these sensors. The results of the cylinder in cross flow tests are given.

Fabrication of an infrared Shack-Hartmann sensor by combining high-speed single-point diamond milling and precision compression molding processes.

PubMed

Zhang, Lin; Zhou, Wenchen; Naples, Neil J; Yi, Allen Y

2018-05-01

A novel fabrication method by combining high-speed single-point diamond milling and precision compression molding processes for fabrication of discontinuous freeform microlens arrays was proposed. Compared with slow tool servo diamond broaching, high-speed single-point diamond milling was selected for its flexibility in the fabrication of true 3D optical surfaces with discontinuous features. The advantage of single-point diamond milling is that the surface features can be constructed sequentially by spacing the axes of a virtual spindle at arbitrary positions based on the combination of rotational and translational motions of both the high-speed spindle and linear slides. By employing this method, each micro-lenslet was regarded as a microstructure cell by passing the axis of the virtual spindle through the vertex of each cell. An optimization arithmetic based on minimum-area fabrication was introduced to the machining process to further increase the machining efficiency. After the mold insert was machined, it was employed to replicate the microlens array onto chalcogenide glass. In the ensuing optical measurement, the self-built Shack-Hartmann wavefront sensor was proven to be accurate in detecting an infrared wavefront by both experiments and numerical simulation. The combined results showed that precision compression molding of chalcogenide glasses could be an economic and precision optical fabrication technology for high-volume production of infrared optics.

Chemical Gas Sensors for Aeronautic and Space Applications 2

NASA Technical Reports Server (NTRS)

Hunter, Gary W.; Chen, Liong-Yu; Neudeck, Phil G.; Knight, Dale; Liu, C. C.; Wu, Q. H.; Zhou, H. J.; Makel, Darby; Liu, M.; Rauch, W. A.

1998-01-01

Aeronautic and space applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. Areas of interest include launch vehicle safety monitoring, emission monitoring, and fire detection. This paper discusses the needs of aeronautic and space applications and the point-contact sensor technology being developed to address these needs. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Sensor development for each application involves its own challenges in the fields of materials science and fabrication technology. The number of dual-use commercial applications of this microfabricated gas sensor technology make this area of sensor development a field of significant interest.

Chemical Gas Sensors for Aeronautics and Space Applications III

NASA Technical Reports Server (NTRS)

Hunter, G. W.; Neudeck, P. G.; Chen, L. Y.; Liu, C. C.; Wu, Q. H.; Sawayda, M. S.; Jin, Z.; Hammond, J.; Makel, D.; Liu, M.;

A modular optical sensor

NASA Astrophysics Data System (ADS)

Conklin, John Albert